<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema" xmlns:cc="http://www.xml-cml.org/dictionary/compchem/" xmlns:cml="http://www.xml-cml.org/schema" xmlns:cmlx="http://www.xml-cml.org/schema/cmlx" xmlns:convention="http://www.xml-cml.org/convention/" xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/" xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/" xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/" xmlns:si="http://www.xml-cml.org/unit/si/" xmlns:xi="http://www.w3.org/2001/XInclude" xmlns:xsd="http://www.w3.org/2001/XMLSchema" convention="convention:compchem" id="grrm.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module cmlx:templateRef="final-geometry"/>
         <module cmlx:templateRef="frequencies"/>
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar cmlx:templateRef="program.name" dataType="xsd:string">GRRM</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:integer">23</scalar>
               </parameter>
               <parameter dictRef="cc:programDate">
                  <scalar dataType="xsd:string">January 23, 2023</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:jobtype">
                  <scalar dataType="xsd:string">Saddle</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">wB97XD</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">def2svpp</scalar>
               </parameter>
               <parameter dictRef="cc:charge">
                  <scalar dataType="xsd:integer">0</scalar>
               </parameter>
               <parameter dictRef="cc:multiplicity">
                  <scalar dataType="xsd:integer">1</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">1</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0622152" y3="-0.9344471" z3="-0.53777469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77373758" y3="-1.91682276" z3="-1.361121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24472561" y3="-0.96680646" z3="-1.23730769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87722115" y3="1.48940947" z3="-0.96021251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40768748" y3="0.32296043" z3="-0.38193484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71899968" y3="2.66212131" z3="-1.19439567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05233548" y3="2.72573216" z3="-0.82767525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34195633" y3="4.96709307" z3="-0.62995126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83112955" y3="3.77266246" z3="-1.08053419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.68822992" y3="5.84126312" z3="-0.55006777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20916001" y3="1.4848059" z3="-1.65226835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.23591095" y3="0.35309553" z3="0.31615249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83405937" y3="0.3030048" z3="-0.55792823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71051187" y3="0.65803871" z3="0.34264822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.822019" y3="-0.96564796" z3="-1.38311141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07905829" y3="-2.50346006" z3="-1.29075581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97536251" y3="-5.31420309" z3="-6.36362523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70661826" y3="-4.91400421" z3="-5.3817942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0031363" y3="-3.8611378" z3="-2.88784307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70947133" y3="-3.53970418" z3="-5.17581507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38171225" y3="-5.77812553" z3="-4.33384195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04500263" y3="-5.24579143" z3="-3.09454951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36750974" y3="-2.98330745" z3="-3.934103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97139025" y3="-2.84466542" z3="-5.97738542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40412454" y3="-6.86175332" z3="-4.47493009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.82704756" y3="-5.90865541" z3="-2.25265506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59351445" y3="-3.35275736" z3="-1.62970938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.46336862" y3="-3.81216041" z3="-0.94481937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.85294122" y3="-4.77456343" z3="-1.29145057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.52557412" y3="-3.61683853" z3="0.52238101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.71214031" y3="-3.33760027" z3="3.30425322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.03113523" y3="-4.66008112" z3="1.30906602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11780099" y3="-2.43067672" z3="1.14290926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21417144" y3="-2.29334056" z3="2.52497716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.11715259" y3="-4.52426748" z3="2.69221807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.32525952" y3="-5.60164906" z3="0.83640246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26147534" y3="-1.5839679" z3="0.56779739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11295015" y3="-1.35643772" z3="2.98460855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.48104048" y3="-5.35927034" z3="3.29705396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.77227377" y3="-3.23416516" z3="4.39154869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35084939" y3="-1.64833866" z3="-3.83730559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53368423" y3="-1.30742354" z3="-2.91641034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38181552" y3="3.56896277" z3="-1.33480206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13711854" y3="-2.76092889" z3="-1.74816346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99807839" y3="-3.01167517" z3="-0.67461029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13096436" y3="-2.25763369" z3="0.36235342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.75781859" y3="-0.76644351" z3="0.99702708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.22681738" y3="-0.3404238" z3="-0.07186023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.44452309" y3="0.54295504" z3="1.01078674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.22736102" y3="-1.28242077" z3="2.73015282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.61825217" y3="-4.18140427" z3="-0.62926163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.43422427" y3="-4.4898979" z3="0.49006241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.92756906" y3="-0.08611341" z3="-1.10417599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.73782588" y3="0.55203322" z3="0.33173855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.95949421" y3="-1.16628319" z3="-0.10912113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.10489865" y3="0.83658271" z3="0.0064384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.53706165" y3="0.23228327" z3="1.55336601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.85261047" y3="1.44458498" z3="1.50449632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.58192287" y3="-0.4174345" z3="3.31868274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.02614467" y3="-2.04442281" z3="2.72949692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.34593088" y3="-1.70780081" z3="3.24292201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.30935688" y3="-3.81969873" z3="0.52689438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.86380798" y3="-4.40948099" z3="1.42850805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.76873287" y3="-5.52418903" z3="0.33388902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.39511403" y3="-2.17355508" z3="-0.05853616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17110742" y3="-3.22000311" z3="-0.96372113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.44148077" y3="-4.34332394" z3="-0.59284459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.94654528" y3="-4.41657807" z3="0.70407479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18816407" y3="-3.41613639" z3="1.64136819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90700381" y3="-2.29348195" z3="1.25109086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5210932" y3="-3.12513671" z3="-1.99488947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.22681281" y3="-5.13748497" z3="-1.30866173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.10893781" y3="-5.55620081" z3="1.08691843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78479019" y3="-3.51348184" z3="2.64994139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06883769" y3="-1.48410034" z3="1.96507344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54886543" y3="3.99226714" z3="-0.37597615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89759528" y3="3.68620779" z3="-0.50328635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30915216" y3="2.93565094" z3="-1.59975172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42090412" y3="2.54656325" z3="-2.59884287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07932819" y3="2.87693307" z3="-2.46569928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.2002939" y3="4.5172971" z3="0.51687479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.62118163" y3="3.97556374" z3="0.2590831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69716477" y3="2.47124071" z3="-1.66051168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77939054" y3="1.97062632" z3="-3.45259007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62744652" y3="2.55438227" z3="-3.23109397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.92395194" y3="-5.75333382" z3="2.26709981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63297202" y3="-6.2343029" z3="0.19559251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00384076" y3="1.71772609" z3="-2.5639521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45817352" y3="2.83664925" z3="-0.78895354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.7821598" y3="0.19857422" z3="-1.8441448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07678699" y3="1.43384147" z3="-1.7452134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98532696" y3="0.13859955" z3="-2.59996778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.45921105" y3="1.24395948" z3="-3.2619485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52173095" y3="-0.81368353" z3="-2.65518364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38288071" y3="1.18504921" z3="-3.844344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57640871" y3="2.55050853" z3="-2.47282285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73484635" y3="2.45860381" z3="-3.20666877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02427967" y3="3.4919766" z3="-2.45269169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09599842" y3="3.33097649" z3="-3.75866923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.55670767" y3="3.95395412" z3="-0.28640403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.69756392" y3="5.09065824" z3="-0.22733781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.87528743" y3="4.08109478" z3="0.23388421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.32781685" y3="5.27851223" z3="0.73393256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53180383" y3="3.20870702" z3="0.24119873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34444319" y3="5.34986785" z3="1.13083502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.19989578" y3="6.32007821" z3="0.28212748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48786265" y3="6.41796694" z3="0.74709374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53342774" y3="7.18776598" z3="0.30824092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86191725" y3="7.36703638" z3="1.14109291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37139096" y3="-3.52923235" z3="-3.03308116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.63994251" y3="-4.5815691" z3="-2.85292909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19087998" y3="-3.0651957" z3="-3.61441555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46849661" y3="-3.50381466" z3="-3.66326372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.60726734" y3="-1.35797505" z3="-1.91224247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38870739" y3="-0.6708163" z3="-2.29149404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.20863951" y3="-0.93761995" z3="-0.97612082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78398533" y3="-1.35641275" z3="-2.64486808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0622,-.9344,-.5378;6.7737,-1.9168,-1.3611;6.2447,-.9668,-1.2373;4.8772,1.4894,-.9602;4.4077,.323,-.3819;2.719,2.6621,-1.1944;4.0523,2.7257,-.8277;2.342,4.9671,-.63;1.8311,3.7727,-1.0805;1.6882,5.8413,-.5501;2.2092,1.4848,-1.6523;3.2359,.3531,.3162;1.8341,.303,-.5579;.7105,.658,.3426;1.822,-.9656,-1.3831;1.0791,-2.5035,-1.2908;1.9754,-5.3142,-6.3636;1.7066,-4.914,-5.3818;1.0031,-3.8611,-2.8878;1.7095,-3.5397,-5.1758;1.3817,-5.7781,-4.3338;1.045,-5.2458,-3.0945;1.3675,-2.9833,-3.9341;1.9714,-2.8447,-5.9774;1.4041,-6.8618,-4.4749;.827,-5.9087,-2.2527;.5935,-3.3528,-1.6297;-.4634,-3.8122,-.9448;-.8529,-4.7746,-1.2915;-.5256,-3.6168,.5224;-.7121,-3.3376,3.3043;-1.0311,-4.6601,1.3091;-.1178,-2.4307,1.1429;-.2142,-2.2933,2.525;-1.1172,-4.5243,2.6922;-1.3253,-5.6016,.8364;.2615,-1.584,.5678;.113,-1.3564,2.9846;-1.481,-5.3593,3.2971;-.7723,-3.2342,4.3915;1.3508,-1.6483,-3.8373;1.5337,-1.3074,-2.9164;.3818,3.569,-1.3348;-2.1371,-2.7609,-1.7482;-2.9981,-3.0117,-.6746;-3.131,-2.2576,.3624;-3.7578,-.7664,.997;-5.2268,-.3404,-.0719;-2.4445,.543,1.0108;-4.2274,-1.2824,2.7302;-3.6183,-4.1814,-.6293;-4.4342,-4.4899,.4901;-4.9276,-.0861,-1.1042;-5.7378,.552,.3317;-5.9595,-1.1663,-.1091;-2.1049,.8366,.0064;-1.5371,.2323,1.5534;-2.8526,1.4446,1.5045;-4.5819,-.4174,3.3187;-5.0261,-2.0444,2.7295;-3.3459,-1.7078,3.2429;-5.3094,-3.8197,.5269;-3.8638,-4.4095,1.4285;-4.7687,-5.5242,.3339;4.3951,-2.1736,-.0585;4.1711,-3.22,-.9637;3.4415,-4.3433,-.5928;2.9465,-4.4166,.7041;3.1882,-3.4161,1.6414;3.907,-2.2935,1.2511;4.5211,-3.1251,-1.9949;3.2268,-5.1375,-1.3087;2.1089,-5.5562,1.0869;2.7848,-3.5135,2.6499;4.0688,-1.4841,1.9651;-.5489,3.9923,-.376;-1.8976,3.6862,-.5033;-2.3092,2.9357,-1.5998;-1.4209,2.5466,-2.5988;-.0793,2.8769,-2.4657;-.2003,4.5173,.5169;-2.6212,3.9756,.2591;-3.6972,2.4712,-1.6605;-1.7794,1.9706,-3.4526;.6274,2.5544,-3.2311;1.924,-5.7533,2.2671;1.633,-6.2343,.1956;-4.0038,1.7177,-2.564;-4.4582,2.8366,-.789;6.7822,.1986,-1.8441;6.0768,1.4338,-1.7452;7.9853,.1386,-2.6;8.4592,1.244,-3.2619;8.5217,-.8137,-2.6552;9.3829,1.185,-3.8443;6.5764,2.5505,-2.4728;7.7348,2.4586,-3.2067;6.0243,3.492,-2.4527;8.096,3.331,-3.7587;4.5567,3.954,-.2864;3.6976,5.0907,-.2273;5.8753,4.0811,.2339;6.3278,5.2785,.7339;6.5318,3.2087,.2412;7.3444,5.3499,1.1308;4.1999,6.3201,.2821;5.4879,6.418,.7471;3.5334,7.1878,.3082;5.8619,7.367,1.1411;-2.3714,-3.5292,-3.0331;-2.6399,-4.5816,-2.8529;-3.1909,-3.0652,-3.6144;-1.4685,-3.5038,-3.6633;-1.6073,-1.358,-1.9122;-2.3887,-.6708,-2.2915;-1.2086,-.9376,-.9761;-.784,-1.3564,-2.6449;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661688494982</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003001803958 0.000210919726 0.021064368585 0.005338409437</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037834495 0.000034926 0.000046663 0.000146250 0.000184236 0.000242854 0.000289306 0.000371099 0.000391215 0.000481717 0.000545354 0.000641452 0.000721174 0.000756686 0.000823386 0.000870457 0.000933118 0.001059232 0.001113485 0.001173412 0.001219005 0.001314185 0.001397741 0.001412473 0.001443159 0.001621699 0.001738093 0.001846915 0.002100107 0.002172308 0.002971539 0.003088237 0.003185004 0.003516081 0.003887428 0.004168706 0.004295472 0.004353102 0.004781006 0.005290603 0.005557980 0.005871226 0.006102839 0.006533867 0.006763904 0.007257796 0.007533140 0.007874449 0.008169004 0.009224361 0.009335012 0.010106481 0.010275680 0.012420077 0.012747899 0.013221399 0.014227726 0.014585134 0.014889294 0.015274200 0.015732249 0.015851089 0.016120765 0.016396038 0.017311464 0.017954875 0.018372542 0.020282040 0.021027484 0.022189091 0.022996039 0.023194456 0.024498154 0.024910562 0.025948079 0.026462957 0.026721187 0.027760259 0.028850405 0.029682249 0.030412133 0.030995484 0.031843253 0.032666730 0.033666017 0.037020061 0.037678519 0.038337991 0.039091664 0.040064430 0.040758022 0.043125324 0.045257982 0.046123596 0.047085124 0.048076668 0.049669415 0.050666008 0.051321636 0.051556700 0.051799795 0.052281415 0.052386738 0.052539709 0.053793195 0.054709074 0.056491786 0.056836728 0.056958409 0.057204027 0.057572524 0.058382914 0.059197108 0.059485385 0.060239815 0.060470982 0.061436534 0.061679850 0.064546525 0.064601690 0.065527075 0.067694957 0.067959264 0.069195648 0.071585814 0.072647174 0.076354275 0.076912759 0.080003717 0.080938385 0.082078351 0.086284336 0.089450931 0.090799645 0.092574545 0.092837443 0.094161744 0.095114075 0.095285921 0.095862674 0.096359081 0.096851918 0.097704081 0.098147471 0.099238377 0.099433115 0.099980260 0.101230955 0.101955932 0.102644793 0.103665585 0.104206901 0.105017745 0.106503518 0.107313952 0.107846621 0.108669384 0.110120357 0.112551460 0.113337793 0.116022695 0.116459214 0.117144817 0.119409611 0.122725503 0.125536190 0.127577762 0.128181101 0.131079611 0.133027801 0.135105417 0.136685498 0.141957807 0.144238015 0.144620563 0.145699687 0.146686417 0.147476304 0.152479388 0.157233544 0.159716176 0.169704578 0.173846445 0.174625123 0.180356865 0.183144024 0.184629213 0.185289038 0.188023268 0.189463823 0.199819933 0.201749851 0.203273306 0.204619208 0.206772664 0.207126358 0.208875378 0.209515334 0.212239849 0.215090704 0.216461945 0.224677705 0.231447817 0.232375658 0.232965071 0.234902120 0.243968926 0.247997183 0.254233472 0.254982254 0.256667436 0.258669251 0.271366969 0.276161326 0.289386044 0.295184758 0.296980283 0.299146541 0.303760458 0.305846031 0.307519075 0.310661955 0.320010041 0.321769773 0.324622599 0.327585260 0.344194300 0.346171557 0.346631990 0.350413170 0.354644250 0.357903832 0.358904315 0.363817684 0.366582924 0.379835292 0.404313459 0.424709306 0.430016397 0.444296274 0.462399524 0.462983834 0.473276702 0.474603712 0.477886139 0.479419891 0.498017506 0.505576769 0.540756130 0.559683687 0.566697994 0.569433216 0.583209923 0.598023501 0.604134329 0.632960315 0.642771748 0.665254608 0.670023067 0.674343216 0.681277053 0.684353139 0.690636083 0.691585525 0.704240253 0.704733519 0.713445473 0.737027769 0.750678806 0.771569946 0.775823328 0.797848123 0.804069985 0.810589084 0.814457652 0.816100170 0.819367298 0.820134183 0.825961333 0.829321874 0.830453326 0.835016865 0.840487494 0.842045367 0.844581087 0.848588663 0.856379499 0.859227647 0.867332013 0.871635244 0.874886732 0.886480887 0.887694653 0.893543012 0.914723280 0.923898258 0.930840047 0.933606734 0.958343825 0.969105223 0.975819471 0.989115695 0.999612136 1.012913761 1.034005255 1.042601486 1.049150119 1.055207449 1.072695684 1.084180852 1.088639614 1.109989502 1.110584415 1.116084932 1.122411203 1.123318267 1.133999068 1.142156794 1.161134984 1.168703592 1.172568602 1.173185981 1.200369346 1.203625933 1.214291559 1.236709491 1.247525160 1.291694606 1.295693364 1.314022702 1.326037276 1.326393121 1.330133402 1.332478864 1.334418178 1.340914156 1.345754604 1.362006430 1.377186077 1.378844838 1.380938184 1.381559418 1.557325337 1.661591638 1.671870284</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">2</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06714024" y3="-0.93691504" z3="-0.53751959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77945282" y3="-1.91786891" z3="-1.36107954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24950354" y3="-0.96834046" z3="-1.23742368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87947256" y3="1.48656006" z3="-0.961241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41160205" y3="0.32006357" z3="-0.38183097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71997848" y3="2.65772245" z3="-1.19478468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05344437" y3="2.72219935" z3="-0.82881526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34122303" y3="4.96221478" z3="-0.63082552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83109804" y3="3.76731489" z3="-1.0808704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.68683016" y3="5.83586401" z3="-0.55090364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21054727" y3="1.47967731" z3="-1.65126439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24043518" y3="0.35008484" z3="0.31746701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83781631" y3="0.29955881" z3="-0.55490358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71461371" y3="0.65372535" z3="0.34632396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82636499" y3="-0.96955406" z3="-1.37985457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08042813" y3="-2.49645152" z3="-1.28930901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97123688" y3="-5.30346745" z3="-6.36516383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70384141" y3="-4.9038817" z3="-5.38273407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0033272" y3="-3.8528745" z3="-2.88766679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70641172" y3="-3.5297563" z3="-5.17610442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38122666" y3="-5.76886539" z3="-4.33469514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04575895" y3="-5.23737766" z3="-3.0949298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36640597" y3="-2.97396416" z3="-3.9334923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96707901" y3="-2.83421018" z3="-5.97763947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40458168" y3="-6.85240278" z3="-4.47598324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.82987588" y3="-5.90038815" z3="-2.25267736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59524382" y3="-3.34694298" z3="-1.6278451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.45478554" y3="-3.81180156" z3="-0.94044964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.85025129" y3="-4.76947272" z3="-1.29060254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.52209942" y3="-3.61373683" z3="0.52463514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.71885839" y3="-3.33229647" z3="3.30532378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.03200469" y3="-4.65586501" z3="1.3100708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11462714" y3="-2.42770372" z3="1.14579813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.2159141" y3="-2.28942239" z3="2.5273348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.12305484" y3="-4.51893698" z3="2.69266177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.32655753" y3="-5.59683606" z3="0.83663532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26677167" y3="-1.58121845" z3="0.57186794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1104789" y3="-1.35260541" z3="2.98760374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.49144628" y3="-5.35255998" z3="3.29664604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.78432018" y3="-3.22751246" z3="4.39222797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35084238" y3="-1.63925333" z3="-3.83572198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5354497" y3="-1.30028921" z3="-2.9144018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38175074" y3="3.56267789" z3="-1.33474114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14455315" y3="-2.75483599" z3="-1.74859176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99411941" y3="-3.00959824" z3="-0.66983616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11705603" y3="-2.25790321" z3="0.37164887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.75760836" y3="-0.77143384" z3="0.99888436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.21987433" y3="-0.35709553" z3="-0.08377181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.45116449" y3="0.54525267" z3="1.01920355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.23793798" y3="-1.28120242" z3="2.73124788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.61561564" y3="-4.18004974" z3="-0.62141635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.43070836" y3="-4.48472292" z3="0.49902166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.9125647" y3="-0.10709752" z3="-1.11480468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.73892119" y3="0.53461721" z3="0.31067418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.94765504" y3="-1.18721409" z3="-0.12358533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.10372273" y3="0.83549179" z3="0.0164457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.54744523" y3="0.24103127" z3="1.57196494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.86891528" y3="1.44696807" z3="1.50476317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.59999728" y3="-0.41402587" z3="3.31212017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.03384452" y3="-2.04620293" z3="2.72950413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.35868482" y3="-1.7001458" z3="3.2531802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.30569523" y3="-3.81406477" z3="0.53536742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.8598607" y3="-4.4025685" z3="1.43710513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.76648665" y3="-5.51915147" z3="0.34598925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40061505" y3="-2.17658182" z3="-0.05886549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17813829" y3="-3.22299381" z3="-0.96454321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.44675117" y3="-4.34572211" z3="-0.59544184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.94888657" y3="-4.41867323" z3="0.70039445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18993419" y3="-3.41893543" z3="1.63859192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91036788" y3="-2.29671343" z3="1.24994844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.530459" y3="-3.12836055" z3="-1.99493575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.23290339" y3="-5.13959803" z3="-1.31183754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.10801604" y3="-5.55665287" z3="1.08069517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78445437" y3="-3.51611936" z3="2.64635779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07134758" y3="-1.4876135" z3="1.9644256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54871136" y3="3.98462025" z3="-0.37510596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89765065" y3="3.67961232" z3="-0.5029652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30979578" y3="2.93160009" z3="-1.60092987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42164755" y3="2.54342239" z3="-2.60047281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07970282" y3="2.87221684" z3="-2.46646266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.19984621" y3="4.50802461" z3="0.51857905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.62106056" y3="3.9682086" z3="0.25985394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69875462" y3="2.46967941" z3="-1.66358261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.78063441" y3="1.96962816" z3="-3.45545638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62691744" y3="2.5501629" z3="-3.23225765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.92394597" y3="-5.75715049" z3="2.26038113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.62812742" y3="-6.22984844" z3="0.18758018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00708866" y3="1.72178859" z3="-2.57100608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45874513" y3="2.83192229" z3="-0.78977062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78559808" y3="0.19731022" z3="-1.84493661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07881134" y3="1.43182438" z3="-1.74660875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98875333" y3="0.13836194" z3="-2.60089411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46126353" y3="1.24397662" z3="-3.26344431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52632159" y3="-0.81329105" z3="-2.65571955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38495722" y3="1.18589997" z3="-3.84588782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57703974" y3="2.5487257" z3="-2.47476649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73551671" y3="2.45782438" z3="-3.2086571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02383333" y3="3.48956261" z3="-2.45489284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09563735" y3="3.33038621" z3="-3.76102527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.55695145" y3="3.95079421" z3="-0.28780663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.69688546" y3="5.08678023" z3="-0.22866715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.87545254" y3="4.07878385" z3="0.23237964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.32710415" y3="5.27650157" z3="0.73244648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53250684" y3="3.2067931" z3="0.23971242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34364909" y3="5.34855423" z3="1.12940699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.19839562" y3="6.31655594" z3="0.28063673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48631132" y3="6.41533709" z3="0.74554832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53127444" y3="7.18372903" z3="0.30671179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.85966893" y3="7.36467867" z3="1.13950807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3772382" y3="-3.52645264" z3="-3.03066805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65410887" y3="-4.57607307" z3="-2.84735763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19099218" y3="-3.0591945" z3="-3.61671249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47224071" y3="-3.5096355" z3="-3.65827087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.60958162" y3="-1.35459671" z3="-1.91311059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38912561" y3="-0.66646238" z3="-2.29301504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.21052952" y3="-0.93389294" z3="-0.97732926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78656158" y3="-1.35497769" z3="-2.64602957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0671,-.9369,-.5375;6.7795,-1.9179,-1.3611;6.2495,-.9683,-1.2374;4.8795,1.4866,-.9612;4.4116,.3201,-.3818;2.72,2.6577,-1.1948;4.0534,2.7222,-.8288;2.3412,4.9622,-.6308;1.8311,3.7673,-1.0809;1.6868,5.8359,-.5509;2.2105,1.4797,-1.6513;3.2404,.3501,.3175;1.8378,.2996,-.5549;.7146,.6537,.3463;1.8264,-.9696,-1.3799;1.0804,-2.4965,-1.2893;1.9712,-5.3035,-6.3652;1.7038,-4.9039,-5.3827;1.0033,-3.8529,-2.8877;1.7064,-3.5298,-5.1761;1.3812,-5.7689,-4.3347;1.0458,-5.2374,-3.0949;1.3664,-2.974,-3.9335;1.9671,-2.8342,-5.9776;1.4046,-6.8524,-4.476;.8299,-5.9004,-2.2527;.5952,-3.3469,-1.6278;-.4548,-3.8118,-.9404;-.8503,-4.7695,-1.2906;-.5221,-3.6137,.5246;-.7189,-3.3323,3.3053;-1.032,-4.6559,1.3101;-.1146,-2.4277,1.1458;-.2159,-2.2894,2.5273;-1.1231,-4.5189,2.6927;-1.3266,-5.5968,.8366;.2668,-1.5812,.5719;.1105,-1.3526,2.9876;-1.4914,-5.3526,3.2966;-.7843,-3.2275,4.3922;1.3508,-1.6393,-3.8357;1.5354,-1.3003,-2.9144;.3818,3.5627,-1.3347;-2.1446,-2.7548,-1.7486;-2.9941,-3.0096,-.6698;-3.1171,-2.2579,.3716;-3.7576,-.7714,.9989;-5.2199,-.3571,-.0838;-2.4512,.5453,1.0192;-4.2379,-1.2812,2.7312;-3.6156,-4.18,-.6214;-4.4307,-4.4847,.499;-4.9126,-.1071,-1.1148;-5.7389,.5346,.3107;-5.9477,-1.1872,-.1236;-2.1037,.8355,.0164;-1.5474,.241,1.572;-2.8689,1.447,1.5048;-4.6,-.414,3.3121;-5.0338,-2.0462,2.7295;-3.3587,-1.7001,3.2532;-5.3057,-3.8141,.5354;-3.8599,-4.4026,1.4371;-4.7665,-5.5192,.346;4.4006,-2.1766,-.0589;4.1781,-3.223,-.9645;3.4468,-4.3457,-.5954;2.9489,-4.4187,.7004;3.1899,-3.4189,1.6386;3.9104,-2.2967,1.2499;4.5305,-3.1284,-1.9949;3.2329,-5.1396,-1.3118;2.108,-5.5567,1.0807;2.7845,-3.5161,2.6464;4.0713,-1.4876,1.9644;-.5487,3.9846,-.3751;-1.8977,3.6796,-.503;-2.3098,2.9316,-1.6009;-1.4216,2.5434,-2.6005;-.0797,2.8722,-2.4665;-.1998,4.508,.5186;-2.6211,3.9682,.2599;-3.6988,2.4697,-1.6636;-1.7806,1.9696,-3.4555;.6269,2.5502,-3.2323;1.9239,-5.7572,2.2604;1.6281,-6.2298,.1876;-4.0071,1.7218,-2.571;-4.4587,2.8319,-.7898;6.7856,.1973,-1.8449;6.0788,1.4318,-1.7466;7.9888,.1384,-2.6009;8.4613,1.244,-3.2634;8.5263,-.8133,-2.6557;9.385,1.1859,-3.8459;6.577,2.5487,-2.4748;7.7355,2.4578,-3.2087;6.0238,3.4896,-2.4549;8.0956,3.3304,-3.761;4.557,3.9508,-.2878;3.6969,5.0868,-.2287;5.8755,4.0788,.2324;6.3271,5.2765,.7324;6.5325,3.2068,.2397;7.3436,5.3486,1.1294;4.1984,6.3166,.2806;5.4863,6.4153,.7455;3.5313,7.1837,.3067;5.8597,7.3647,1.1395;-2.3772,-3.5265,-3.0307;-2.6541,-4.5761,-2.8474;-3.191,-3.0592,-3.6167;-1.4722,-3.5096,-3.6583;-1.6096,-1.3546,-1.9131;-2.3891,-.6665,-2.293;-1.2105,-.9339,-.9773;-.7866,-1.355,-2.646;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661706965959</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000289536853 0.000043084196 0.027776872122 0.005338153756</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001554206297 0.001036137531</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037643930 0.000029089 0.000044593 0.000133394 0.000156538 0.000223851 0.000289302 0.000365611 0.000397223 0.000480825 0.000548335 0.000641354 0.000721491 0.000754195 0.000824973 0.000871593 0.000932450 0.001057702 0.001112925 0.001173055 0.001215903 0.001312179 0.001400074 0.001412504 0.001449436 0.001619888 0.001738921 0.001852313 0.002095089 0.002174578 0.002978555 0.003081620 0.003181718 0.003511921 0.003891255 0.004174130 0.004295284 0.004349724 0.004783021 0.005290903 0.005559688 0.005872414 0.006103035 0.006535049 0.006765339 0.007258035 0.007535065 0.007869524 0.008170092 0.009224001 0.009335086 0.010107022 0.010276142 0.012419357 0.012747029 0.013221694 0.014228952 0.014584895 0.014889267 0.015273888 0.015732363 0.015851072 0.016120722 0.016396125 0.017310897 0.017954020 0.018373640 0.020281877 0.021023428 0.022189056 0.022996149 0.023194459 0.024498458 0.024910108 0.025948073 0.026462752 0.026721157 0.027760372 0.028850366 0.029682279 0.030412144 0.030995335 0.031838962 0.032666998 0.033666118 0.037020813 0.037678567 0.038340099 0.039091688 0.040064752 0.040756979 0.043125669 0.045258054 0.046123429 0.047085696 0.048077627 0.049669417 0.050666009 0.051321569 0.051556707 0.051799784 0.052281414 0.052386737 0.052539710 0.053793191 0.054708983 0.056491754 0.056836719 0.056958127 0.057203566 0.057571984 0.058382086 0.059197037 0.059485383 0.060239043 0.060471064 0.061436076 0.061678396 0.064546534 0.064601669 0.065526882 0.067694496 0.067960078 0.069196489 0.071585870 0.072647182 0.076353990 0.076912516 0.080002885 0.080942966 0.082078428 0.086284334 0.089450926 0.090799704 0.092574564 0.092837500 0.094161744 0.095113978 0.095285929 0.095862537 0.096359005 0.096852166 0.097704060 0.098147446 0.099238364 0.099433105 0.099980403 0.101230964 0.101955954 0.102644255 0.103665597 0.104208069 0.105018080 0.106503919 0.107314190 0.107846356 0.108670184 0.110120370 0.112551476 0.113337584 0.116022144 0.116459140 0.117144799 0.119411093 0.122725525 0.125536224 0.127577786 0.128181095 0.131079555 0.133027588 0.135105767 0.136685507 0.141957825 0.144238045 0.144620568 0.145699698 0.146686422 0.147476275 0.152479429 0.157233548 0.159716406 0.169704578 0.173846433 0.174625157 0.180356896 0.183144015 0.184631544 0.185290572 0.188023672 0.189464568 0.199822231 0.201749972 0.203273305 0.204619238 0.206772669 0.207126358 0.208875448 0.209515333 0.212239847 0.215090703 0.216461823 0.224677714 0.231447820 0.232375851 0.232965213 0.234902121 0.243968926 0.247997228 0.254233468 0.254982492 0.256667449 0.258669265 0.271367082 0.276161335 0.289386064 0.295184772 0.296981918 0.299146541 0.303760462 0.305846031 0.307519100 0.310665341 0.320010048 0.321769780 0.324623928 0.327585263 0.344194391 0.346172888 0.346632642 0.350413218 0.354644260 0.357906044 0.358904593 0.363817683 0.366585664 0.379835301 0.404313564 0.424709660 0.430016421 0.444296271 0.462399538 0.462984409 0.473276843 0.474607942 0.477886147 0.479420005 0.498017991 0.505576771 0.540756161 0.559684262 0.566698007 0.569433220 0.583209928 0.598031283 0.604134355 0.632960880 0.642771780 0.665254574 0.670023068 0.674343302 0.681277224 0.684353584 0.690636186 0.691585516 0.704240257 0.704733522 0.713445579 0.737027770 0.750678807 0.771569947 0.775823328 0.797853490 0.804070049 0.810589116 0.814457634 0.816100044 0.819367305 0.820134185 0.825961329 0.829322555 0.830453343 0.835019001 0.840487622 0.842047351 0.844581060 0.848590960 0.856389100 0.859233709 0.867332019 0.871635247 0.874886732 0.886481679 0.887695014 0.893543036 0.914726579 0.923898261 0.930840199 0.933609574 0.958343978 0.969106734 0.975819496 0.989116090 0.999612136 1.012913745 1.034005273 1.042602136 1.049150193 1.055207901 1.072718093 1.084180852 1.088639672 1.109989504 1.110584443 1.116088012 1.122411204 1.123318271 1.133999073 1.142156692 1.161136143 1.168703595 1.172568596 1.173185983 1.200369348 1.203625943 1.214292233 1.236709651 1.247528183 1.291696064 1.295693364 1.314022701 1.326037281 1.326393128 1.330133559 1.332478945 1.334418178 1.340914147 1.345755250 1.362009941 1.377186081 1.378844869 1.380938190 1.381559418 1.557325333 1.661592033 1.671870783</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">3</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.07046402" y3="-0.93778476" z3="-0.53764538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78301311" y3="-1.9182217" z3="-1.3613839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25282018" y3="-0.96883528" z3="-1.2376447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88204415" y3="1.48559858" z3="-0.96165423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41477646" y3="0.31913611" z3="-0.38164091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72204261" y3="2.65572204" z3="-1.19516017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05551287" y3="2.72095964" z3="-0.82948797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34159247" y3="4.95977451" z3="-0.63110432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83230852" y3="3.76453371" z3="-1.08111819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.68653012" y3="5.8328882" z3="-0.55086322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21314854" y3="1.47717382" z3="-1.65077726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24407955" y3="0.34932985" z3="0.3185422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84075195" y3="0.29872723" z3="-0.5526152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71802478" y3="0.65422806" z3="0.34868049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82866345" y3="-0.97101043" z3="-1.37661525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08181623" y3="-2.49469875" z3="-1.28723885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.96488901" y3="-5.29152065" z3="-6.36988541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.69884837" y3="-4.89390497" z3="-5.38628635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00179454" y3="-3.84792156" z3="-2.88803444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70050288" y3="-3.52013868" z3="-5.17727317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37888089" y3="-5.7609753" z3="-4.33916116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04510752" y3="-5.23198445" z3="-3.09785041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36222671" y3="-2.96691098" z3="-3.93308813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95913192" y3="-2.82288767" z3="-5.97800051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40296882" y3="-6.84423596" z3="-4.48238408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.8311032" y3="-5.89657593" z3="-2.25637964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59557878" y3="-3.34454057" z3="-1.62659456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.45315935" y3="-3.81054457" z3="-0.93813876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.8489278" y3="-4.76791279" z3="-1.28854766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.51954141" y3="-3.61317119" z3="0.52703274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.72213993" y3="-3.32981456" z3="3.30711266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.03085186" y3="-4.65480968" z3="1.31210392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1126592" y3="-2.42701018" z3="1.14840734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21664716" y3="-2.28783437" z3="2.52960645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.12509114" y3="-4.51682601" z3="2.69435171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.32505463" y3="-5.59579982" z3="0.83851552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26962794" y3="-1.58076373" z3="0.57479497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10919527" y3="-1.35084326" z3="2.98992715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.4954565" y3="-5.34977726" z3="3.29800544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.79056963" y3="-3.22402281" z3="4.39371714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34560124" y3="-1.63235583" z3="-3.83293983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53318671" y3="-1.29564583" z3="-2.91137508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38312498" y3="3.55846552" z3="-1.33489177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14434908" y3="-2.75459521" z3="-1.74231734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.99118647" y3="-3.00950216" z3="-0.66176584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11099036" y3="-2.25752337" z3="0.37983599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.76079104" y3="-0.77114705" z3="0.99793843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.21347425" y3="-0.36629934" z3="-0.101214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.45599775" y3="0.54706225" z3="1.02846163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.25651518" y3="-1.27659036" z3="2.72741339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.61202817" y3="-4.18019571" z3="-0.61112819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.42683568" y3="-4.48303801" z3="0.51000585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.89610901" y3="-0.12046149" z3="-1.13028259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.74098324" y3="0.5250373" z3="0.28289731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.93676637" y3="-1.20026213" z3="-0.14486387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.09505206" y3="0.83375347" z3="0.02926935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.55993706" y3="0.24441778" z3="1.59473443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.8805031" y3="1.45022707" z3="1.50537373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.62727328" y3="-0.40863899" z3="3.30166846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.04973197" y3="-2.04435834" z3="2.72082747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.3809588" y3="-1.69046861" z3="3.25962201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.3024673" y3="-3.81309174" z3="0.54467101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.8560521" y3="-4.3980109" z3="1.44786756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.76167093" y3="-5.51811297" z3="0.35946041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40385482" y3="-2.17786871" z3="-0.06007306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1822082" y3="-3.22372541" z3="-0.96665579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45005833" y3="-4.34650796" z3="-0.5992029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95072155" y3="-4.42018483" z3="0.6960419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19102087" y3="-3.42114282" z3="1.63516776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91219376" y3="-2.29883028" z3="1.24812215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5358091" y3="-3.1285683" z3="-1.99655512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.23677793" y3="-5.13984915" z3="-1.31638854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.10926684" y3="-5.55823809" z3="1.07482054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.784311" y3="-3.51885873" z3="2.64238587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.0725681" y3="-1.49029881" z3="1.96336845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54761297" y3="3.97841409" z3="-0.37467257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89630386" y3="3.67249166" z3="-0.50285761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30795232" y3="2.92559808" z3="-1.60177584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41947049" y3="2.53906456" z3="-2.60168051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07773618" y3="2.86854699" z3="-2.46718694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.19910895" y3="4.50100761" z3="0.51961768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61990812" y3="3.95977657" z3="0.26026115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69693446" y3="2.46402877" z3="-1.66582718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77807257" y3="1.96613062" z3="-3.45739976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62916344" y3="2.54755675" z3="-3.23318731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.92401729" y3="-5.75946135" z3="2.25416448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63015978" y3="-6.23082185" z3="0.18090176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00623579" y3="1.72147481" z3="-2.57724433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45619301" y3="2.82150836" z3="-0.78929528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78847183" y3="0.19687567" z3="-1.84542138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08110291" y3="1.43107847" z3="-1.74743566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.9915287" y3="0.13825089" z3="-2.60158667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46324466" y3="1.24380961" z3="-3.26480081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52965397" y3="-0.81310775" z3="-2.65608296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38683677" y3="1.18598352" z3="-3.84743447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57849031" y3="2.54789283" z3="-2.47629869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73679442" y3="2.45726298" z3="-3.21049163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02472249" y3="3.48840883" z3="-2.45676664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09622843" y3="3.32971859" z3="-3.76347537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.55828685" y3="3.94995808" z3="-0.28882285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.69732232" y3="5.08526773" z3="-0.22937817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.87686818" y3="4.07889955" z3="0.23087485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.32775347" y3="5.2769224" z3="0.730885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53455832" y3="3.2073802" z3="0.23788339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34437303" y3="5.34973071" z3="1.12750772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.19806481" y3="6.31536243" z3="0.27985849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48605547" y3="6.4150824" z3="0.74436811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53027156" y3="7.18200606" z3="0.30621151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.85878331" y3="7.36467622" z3="1.13829981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38037972" y3="-3.52529832" z3="-3.02435405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.6621409" y3="-4.57357362" z3="-2.84105222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19185274" y3="-3.05407272" z3="-3.61033217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47529229" y3="-3.5126635" z3="-3.65183792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61015047" y3="-1.35415936" z3="-1.90807816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39076973" y3="-0.6667823" z3="-2.28733607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.21008174" y3="-0.93274737" z3="-0.97298911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78826915" y3="-1.35419754" z3="-2.64229459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0705,-.9378,-.5376;6.783,-1.9182,-1.3614;6.2528,-.9688,-1.2376;4.882,1.4856,-.9617;4.4148,.3191,-.3816;2.722,2.6557,-1.1952;4.0555,2.721,-.8295;2.3416,4.9598,-.6311;1.8323,3.7645,-1.0811;1.6865,5.8329,-.5509;2.2131,1.4772,-1.6508;3.2441,.3493,.3185;1.8408,.2987,-.5526;.718,.6542,.3487;1.8287,-.971,-1.3766;1.0818,-2.4947,-1.2872;1.9649,-5.2915,-6.3699;1.6988,-4.8939,-5.3863;1.0018,-3.8479,-2.888;1.7005,-3.5201,-5.1773;1.3789,-5.761,-4.3392;1.0451,-5.232,-3.0979;1.3622,-2.9669,-3.9331;1.9591,-2.8229,-5.978;1.403,-6.8442,-4.4824;.8311,-5.8966,-2.2564;.5956,-3.3445,-1.6266;-.4532,-3.8105,-.9381;-.8489,-4.7679,-1.2885;-.5195,-3.6132,.527;-.7221,-3.3298,3.3071;-1.0309,-4.6548,1.3121;-.1127,-2.427,1.1484;-.2166,-2.2878,2.5296;-1.1251,-4.5168,2.6944;-1.3251,-5.5958,.8385;.2696,-1.5808,.5748;.1092,-1.3508,2.9899;-1.4955,-5.3498,3.298;-.7906,-3.224,4.3937;1.3456,-1.6324,-3.8329;1.5332,-1.2956,-2.9114;.3831,3.5585,-1.3349;-2.1443,-2.7546,-1.7423;-2.9912,-3.0095,-.6618;-3.111,-2.2575,.3798;-3.7608,-.7711,.9979;-5.2135,-.3663,-.1012;-2.456,.5471,1.0285;-4.2565,-1.2766,2.7274;-3.612,-4.1802,-.6111;-4.4268,-4.483,.51;-4.8961,-.1205,-1.1303;-5.741,.525,.2829;-5.9368,-1.2003,-.1449;-2.0951,.8338,.0293;-1.5599,.2444,1.5947;-2.8805,1.4502,1.5054;-4.6273,-.4086,3.3017;-5.0497,-2.0444,2.7208;-3.381,-1.6905,3.2596;-5.3025,-3.8131,.5447;-3.8561,-4.398,1.4479;-4.7617,-5.5181,.3595;4.4039,-2.1779,-.0601;4.1822,-3.2237,-.9667;3.4501,-4.3465,-.5992;2.9507,-4.4202,.696;3.191,-3.4211,1.6352;3.9122,-2.2988,1.2481;4.5358,-3.1286,-1.9966;3.2368,-5.1398,-1.3164;2.1093,-5.5582,1.0748;2.7843,-3.5189,2.6424;4.0726,-1.4903,1.9634;-.5476,3.9784,-.3747;-1.8963,3.6725,-.5029;-2.308,2.9256,-1.6018;-1.4195,2.5391,-2.6017;-.0777,2.8685,-2.4672;-.1991,4.501,.5196;-2.6199,3.9598,.2603;-3.6969,2.464,-1.6658;-1.7781,1.9661,-3.4574;.6292,2.5476,-3.2332;1.924,-5.7595,2.2542;1.6302,-6.2308,.1809;-4.0062,1.7215,-2.5772;-4.4562,2.8215,-.7893;6.7885,.1969,-1.8454;6.0811,1.4311,-1.7474;7.9915,.1383,-2.6016;8.4632,1.2438,-3.2648;8.5297,-.8131,-2.6561;9.3868,1.186,-3.8474;6.5785,2.5479,-2.4763;7.7368,2.4573,-3.2105;6.0247,3.4884,-2.4568;8.0962,3.3297,-3.7635;4.5583,3.95,-.2888;3.6973,5.0853,-.2294;5.8769,4.0789,.2309;6.3278,5.2769,.7309;6.5346,3.2074,.2379;7.3444,5.3497,1.1275;4.1981,6.3154,.2799;5.4861,6.4151,.7444;3.5303,7.182,.3062;5.8588,7.3647,1.1383;-2.3804,-3.5253,-3.0244;-2.6621,-4.5736,-2.8411;-3.1919,-3.0541,-3.6103;-1.4753,-3.5127,-3.6518;-1.6102,-1.3542,-1.9081;-2.3908,-.6668,-2.2873;-1.2101,-.9327,-.973;-.7883,-1.3542,-2.6423;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661730082338</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000283289082 0.000044126921 0.030283179278 0.005340344249</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001588483385 0.001058988923</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037658798 0.000016158 0.000045497 0.000141582 0.000158557 0.000222706 0.000290138 0.000364082 0.000402082 0.000487909 0.000567830 0.000642572 0.000722874 0.000755267 0.000827188 0.000876549 0.000939915 0.001056974 0.001113979 0.001172774 0.001219847 0.001312912 0.001402260 0.001412592 0.001451945 0.001617990 0.001739108 0.001852194 0.002097992 0.002174766 0.002977534 0.003083082 0.003183322 0.003512100 0.003891191 0.004174092 0.004294624 0.004350068 0.004782977 0.005291261 0.005559692 0.005872405 0.006102685 0.006535227 0.006765400 0.007257983 0.007534973 0.007871432 0.008170121 0.009224127 0.009335070 0.010107093 0.010276297 0.012419284 0.012747111 0.013221667 0.014228951 0.014584880 0.014889323 0.015273962 0.015732361 0.015851215 0.016120712 0.016396123 0.017310848 0.017953957 0.018373735 0.020281881 0.021023930 0.022189117 0.022996150 0.023194459 0.024498505 0.024910096 0.025948073 0.026462747 0.026721157 0.027760394 0.028850368 0.029682280 0.030412150 0.030995330 0.031838857 0.032666993 0.033666275 0.037020815 0.037678591 0.038340063 0.039091540 0.040064720 0.040756886 0.043126049 0.045258074 0.046123421 0.047085584 0.048077470 0.049669418 0.050666010 0.051321645 0.051556709 0.051799803 0.052281414 0.052386738 0.052539723 0.053793203 0.054708996 0.056491764 0.056836721 0.056958189 0.057203676 0.057572129 0.058382150 0.059197035 0.059485400 0.060239161 0.060471065 0.061436152 0.061678529 0.064546534 0.064601672 0.065526968 0.067695025 0.067960041 0.069196459 0.071585867 0.072647182 0.076354059 0.076912528 0.080003365 0.080943021 0.082078427 0.086284344 0.089450926 0.090799705 0.092574563 0.092837497 0.094161744 0.095114015 0.095285965 0.095862641 0.096359032 0.096852163 0.097704328 0.098147444 0.099238357 0.099433101 0.099980460 0.101230973 0.101955952 0.102644525 0.103665701 0.104208109 0.105018062 0.106503916 0.107314188 0.107846314 0.108670183 0.110120370 0.112551474 0.113337848 0.116022359 0.116459161 0.117144799 0.119411131 0.122725530 0.125536216 0.127577755 0.128181092 0.131079712 0.133027684 0.135105758 0.136685506 0.141957828 0.144238044 0.144620573 0.145699696 0.146686413 0.147476274 0.152479424 0.157233542 0.159716453 0.169704582 0.173846529 0.174625172 0.180356893 0.183144014 0.184632862 0.185290447 0.188023626 0.189465999 0.199826290 0.201750329 0.203273316 0.204619694 0.206772668 0.207126359 0.208875446 0.209515335 0.212239854 0.215090704 0.216462068 0.224677713 0.231447818 0.232375903 0.232965245 0.234902126 0.243968928 0.247997285 0.254233475 0.254982495 0.256667449 0.258669263 0.271367080 0.276161335 0.289386072 0.295184784 0.296983932 0.299146566 0.303760464 0.305846034 0.307519100 0.310665302 0.320010056 0.321769781 0.324623905 0.327585264 0.344194386 0.346172918 0.346632672 0.350413223 0.354644260 0.357906041 0.358904610 0.363817684 0.366585762 0.379835352 0.404313559 0.424709604 0.430016418 0.444296569 0.462399611 0.462984452 0.473276832 0.474607922 0.477886151 0.479420010 0.498017988 0.505576882 0.540756270 0.559684244 0.566698011 0.569433327 0.583209996 0.598037636 0.604134355 0.632963806 0.642771781 0.665254903 0.670023144 0.674343454 0.681277295 0.684355262 0.690637656 0.691585586 0.704240257 0.704733523 0.713445577 0.737027775 0.750678806 0.771569947 0.775823329 0.797854179 0.804070749 0.810590896 0.814458577 0.816103325 0.819367566 0.820134248 0.825961360 0.829323843 0.830453352 0.835020851 0.840487657 0.842047362 0.844581761 0.848590975 0.856389212 0.859234070 0.867332030 0.871635260 0.874886734 0.886481748 0.887695302 0.893543057 0.914727231 0.923898261 0.930840406 0.933610400 0.958344011 0.969106727 0.975819497 0.989116105 0.999612136 1.012914137 1.034005273 1.042602135 1.049150443 1.055207939 1.072718141 1.084180852 1.088639671 1.109989505 1.110584462 1.116089701 1.122411204 1.123318272 1.133999186 1.142158998 1.161138128 1.168703595 1.172568607 1.173185984 1.200369349 1.203625946 1.214295389 1.236710871 1.247528620 1.291697681 1.295693364 1.314022711 1.326037285 1.326393128 1.330133612 1.332479053 1.334418187 1.340914139 1.345755245 1.362010000 1.377186099 1.378844869 1.380938190 1.381559418 1.557325475 1.661592148 1.671870865</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">4</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.07225955" y3="-0.93799007" z3="-0.53801276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78487669" y3="-1.91831974" z3="-1.36171633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25476762" y3="-0.96891069" z3="-1.2377789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88408247" y3="1.48548451" z3="-0.9614252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41666287" y3="0.31894156" z3="-0.3816126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7241281" y3="2.65536271" z3="-1.19515501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05752592" y3="2.72083409" z3="-0.82936584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34288515" y3="4.95918919" z3="-0.63085531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83406062" y3="3.76383225" z3="-1.08099233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.68749365" y3="5.832035" z3="-0.55041354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21547263" y3="1.47679143" z3="-1.65083492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24595675" y3="0.34905641" z3="0.31863621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84256311" y3="0.29870739" z3="-0.55247251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71964599" y3="0.65463928" z3="0.34848107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.8303122" y3="-0.97099497" z3="-1.37644034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08137329" y3="-2.49333361" z3="-1.28662053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9559801" y3="-5.28329506" z3="-6.37425002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.69170428" y3="-4.88707373" z3="-5.38961116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99905144" y3="-3.84463748" z3="-2.88857481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69226604" y3="-3.51352444" z3="-5.17908684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37505518" y3="-5.7556132" z3="-4.34270243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04346108" y3="-5.22839935" z3="-3.10001297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35611605" y3="-2.96214416" z3="-3.93355111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94830727" y3="-2.81504537" z3="-5.97958596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.39999714" y3="-6.83868447" z3="-4.48721787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83190934" y3="-5.89410977" z3="-2.25879624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59488336" y3="-3.34294831" z3="-1.62580927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.45330382" y3="-3.80946649" z3="-0.93630008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.84797111" y3="-4.76769637" z3="-1.28587406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.51681897" y3="-3.6129497" z3="0.52941163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.71916155" y3="-3.32905471" z3="3.30950635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.02641118" y3="-4.65504869" z3="1.31493666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11065843" y3="-2.42636582" z3="1.15046002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21443411" y3="-2.28699519" z3="2.53165777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.12073033" y3="-4.51673066" z3="2.69713427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.31967364" y3="-5.59650084" z3="0.84167962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2704011" y3="-1.57960363" z3="0.57674132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11072933" y3="-1.34961011" z3="2.99167304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.49028309" y3="-5.34986858" z3="3.30100863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.78791871" y3="-3.22285283" z3="4.39602949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33791447" y3="-1.62765945" z3="-3.83179581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52923248" y3="-1.2922736" z3="-2.91048685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38503635" y3="3.55687572" z3="-1.33481403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14399321" y3="-2.75620201" z3="-1.7353872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98960828" y3="-3.0116284" z3="-0.65347408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10873973" y3="-2.25927851" z3="0.38805227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.76509222" y3="-0.7707085" z3="0.99481246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.20670005" y3="-0.37237493" z3="-0.12105877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.45962981" y3="0.54669941" z3="1.03603004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.27894571" y3="-1.26986219" z3="2.72098413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.60897668" y3="-4.18272793" z3="-0.60161774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.42197531" y3="-4.48611109" z3="0.52083492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.8792743" y3="-0.13189411" z3="-1.14824893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.73957065" y3="0.52008622" z3="0.25261413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.92806634" y3="-1.20782677" z3="-0.16757881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.0880278" y3="0.83351328" z3="0.04082728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.57025539" y3="0.24218613" z3="1.6116072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.88751552" y3="1.44998106" z3="1.50926135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.65737079" y3="-0.39999722" z3="3.28735766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.07096025" y3="-2.03878462" z3="2.70906637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.40886739" y3="-1.6800421" z3="3.26496798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.29906272" y3="-3.81807506" z3="0.55533118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.85037021" y3="-4.39844245" z3="1.45791441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.75456593" y3="-5.52212025" z3="0.3718974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40543217" y3="-2.17838723" z3="-0.06153863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18387742" y3="-3.2233298" z3="-0.96921355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45173621" y3="-4.34650134" z3="-0.60300885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95248964" y3="-4.42159445" z3="0.69218619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19252009" y3="-3.42342749" z3="1.63230239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91353995" y3="-2.30059773" z3="1.2464335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53757577" y3="-3.12708779" z3="-1.99896937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.23842809" y3="-5.13904964" z3="-1.32107082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.11145484" y3="-5.56027872" z3="1.06989279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78570108" y3="-3.52220574" z3="2.63937178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07369881" y3="-1.49272711" z3="1.96247697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54588281" y3="3.97487149" z3="-0.37395913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89434939" y3="3.66813639" z3="-0.50246991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30554068" y3="2.92249396" z3="-1.60241239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41679361" y3="2.53754371" z3="-2.60270955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07527115" y3="2.86766254" z3="-2.46775991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.19766063" y3="4.49665194" z3="0.52091061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61815858" y3="3.9541591" z3="0.26091496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69474582" y3="2.46193771" z3="-1.66819609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77506433" y3="1.96550154" z3="-3.45916676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63189642" y3="2.54784974" z3="-3.23401387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.92726508" y3="-5.76337227" z3="2.24910497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63159739" y3="-6.23151756" z3="0.175297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00496208" y3="1.72436715" z3="-2.58326486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45349359" y3="2.8157124" z3="-0.78964096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79054943" y3="0.19686192" z3="-1.8452865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08312704" y3="1.43101943" z3="-1.74724538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99360519" y3="0.13828739" z3="-2.60146626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.4651883" y3="1.24383108" z3="-3.26479283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53179398" y3="-0.81303676" z3="-2.65594259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38874037" y3="1.18603766" z3="-3.84749649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58037791" y3="2.54781503" z3="-2.47624146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73861203" y3="2.45721329" z3="-3.21055045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02651771" y3="3.48827641" z3="-2.45678823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09788394" y3="3.32962917" z3="-3.76370101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.55998917" y3="3.95002874" z3="-0.28885627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.69865216" y3="5.0850719" z3="-0.22933284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.87863549" y3="4.0794651" z3="0.23054028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.32923921" y3="5.27769431" z3="0.73031409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53662954" y3="3.2081741" z3="0.23743411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34594502" y3="5.35090189" z3="1.12663837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.19908304" y3="6.31535427" z3="0.27973011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48715048" y3="6.41555863" z3="0.74391904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.5309906" y3="7.18176368" z3="0.30615912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.85963887" y3="7.36531914" z3="1.13767071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38289472" y3="-3.52611093" z3="-3.01752375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66507593" y3="-4.57423371" z3="-2.83428578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19507466" y3="-3.05376696" z3="-3.60162294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47901577" y3="-3.51383333" z3="-3.64663411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61235526" y3="-1.35479893" z3="-1.90205874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39481772" y3="-0.66862678" z3="-2.27970751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.2108884" y3="-0.9329776" z3="-0.96776065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79203243" y3="-1.35350082" z3="-2.63803152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0723,-.938,-.538;6.7849,-1.9183,-1.3617;6.2548,-.9689,-1.2378;4.8841,1.4855,-.9614;4.4167,.3189,-.3816;2.7241,2.6554,-1.1952;4.0575,2.7208,-.8294;2.3429,4.9592,-.6309;1.8341,3.7638,-1.081;1.6875,5.832,-.5504;2.2155,1.4768,-1.6508;3.246,.3491,.3186;1.8426,.2987,-.5525;.7196,.6546,.3485;1.8303,-.971,-1.3764;1.0814,-2.4933,-1.2866;1.956,-5.2833,-6.3743;1.6917,-4.8871,-5.3896;.9991,-3.8446,-2.8886;1.6923,-3.5135,-5.1791;1.3751,-5.7556,-4.3427;1.0435,-5.2284,-3.1;1.3561,-2.9621,-3.9336;1.9483,-2.815,-5.9796;1.4,-6.8387,-4.4872;.8319,-5.8941,-2.2588;.5949,-3.3429,-1.6258;-.4533,-3.8095,-.9363;-.848,-4.7677,-1.2859;-.5168,-3.6129,.5294;-.7192,-3.3291,3.3095;-1.0264,-4.655,1.3149;-.1107,-2.4264,1.1505;-.2144,-2.287,2.5317;-1.1207,-4.5167,2.6971;-1.3197,-5.5965,.8417;.2704,-1.5796,.5767;.1107,-1.3496,2.9917;-1.4903,-5.3499,3.301;-.7879,-3.2229,4.396;1.3379,-1.6277,-3.8318;1.5292,-1.2923,-2.9105;.385,3.5569,-1.3348;-2.144,-2.7562,-1.7354;-2.9896,-3.0116,-.6535;-3.1087,-2.2593,.3881;-3.7651,-.7707,.9948;-5.2067,-.3724,-.1211;-2.4596,.5467,1.036;-4.2789,-1.2699,2.721;-3.609,-4.1827,-.6016;-4.422,-4.4861,.5208;-4.8793,-.1319,-1.1482;-5.7396,.5201,.2526;-5.9281,-1.2078,-.1676;-2.088,.8335,.0408;-1.5703,.2422,1.6116;-2.8875,1.45,1.5093;-4.6574,-.4,3.2874;-5.071,-2.0388,2.7091;-3.4089,-1.68,3.265;-5.2991,-3.8181,.5553;-3.8504,-4.3984,1.4579;-4.7546,-5.5221,.3719;4.4054,-2.1784,-.0615;4.1839,-3.2233,-.9692;3.4517,-4.3465,-.603;2.9525,-4.4216,.6922;3.1925,-3.4234,1.6323;3.9135,-2.3006,1.2464;4.5376,-3.1271,-1.999;3.2384,-5.139,-1.3211;2.1115,-5.5603,1.0699;2.7857,-3.5222,2.6394;4.0737,-1.4927,1.9625;-.5459,3.9749,-.374;-1.8943,3.6681,-.5025;-2.3055,2.9225,-1.6024;-1.4168,2.5375,-2.6027;-.0753,2.8677,-2.4678;-.1977,4.4967,.5209;-2.6182,3.9542,.2609;-3.6947,2.4619,-1.6682;-1.7751,1.9655,-3.4592;.6319,2.5478,-3.234;1.9273,-5.7634,2.2491;1.6316,-6.2315,.1753;-4.005,1.7244,-2.5833;-4.4535,2.8157,-.7896;6.7905,.1969,-1.8453;6.0831,1.431,-1.7472;7.9936,.1383,-2.6015;8.4652,1.2438,-3.2648;8.5318,-.813,-2.6559;9.3887,1.186,-3.8475;6.5804,2.5478,-2.4762;7.7386,2.4572,-3.2106;6.0265,3.4883,-2.4568;8.0979,3.3296,-3.7637;4.56,3.95,-.2889;3.6987,5.0851,-.2293;5.8786,4.0795,.2305;6.3292,5.2777,.7303;6.5366,3.2082,.2374;7.3459,5.3509,1.1266;4.1991,6.3154,.2797;5.4872,6.4156,.7439;3.531,7.1818,.3062;5.8596,7.3653,1.1377;-2.3829,-3.5261,-3.0175;-2.6651,-4.5742,-2.8343;-3.1951,-3.0538,-3.6016;-1.479,-3.5138,-3.6466;-1.6124,-1.3548,-1.9021;-2.3948,-.6686,-2.2797;-1.2109,-.933,-.9678;-.792,-1.3535,-2.638;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661746019436</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000223869607 0.000032909173 0.028954037441 0.005341705771</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002010098676 0.001340065784</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659066 0.000027978 0.000046159 0.000140146 0.000191975 0.000225716 0.000290244 0.000364811 0.000401187 0.000488323 0.000564769 0.000642835 0.000723035 0.000754965 0.000827570 0.000877328 0.000940521 0.001061511 0.001113961 0.001173029 0.001219682 0.001312811 0.001403477 0.001412611 0.001451921 0.001619723 0.001739130 0.001852232 0.002100420 0.002174830 0.002977780 0.003083186 0.003183582 0.003512227 0.003891303 0.004174557 0.004295110 0.004350071 0.004783127 0.005291509 0.005559692 0.005872496 0.006102808 0.006535277 0.006765373 0.007257954 0.007534957 0.007871210 0.008170128 0.009224137 0.009335058 0.010107093 0.010276305 0.012419266 0.012747134 0.013221664 0.014228951 0.014584878 0.014889333 0.015273969 0.015732362 0.015851172 0.016120711 0.016396120 0.017310865 0.017953939 0.018373730 0.020281883 0.021024099 0.022189135 0.022996151 0.023194459 0.024498549 0.024910154 0.025948077 0.026462741 0.026721162 0.027760395 0.028850453 0.029682280 0.030412157 0.030995329 0.031839007 0.032666991 0.033666527 0.037020846 0.037678565 0.038339922 0.039091538 0.040064791 0.040756886 0.043125897 0.045258081 0.046123421 0.047085493 0.048077235 0.049669419 0.050666009 0.051321678 0.051556709 0.051799810 0.052281415 0.052386738 0.052539730 0.053793211 0.054709000 0.056491767 0.056836722 0.056958226 0.057203734 0.057572229 0.058382252 0.059197062 0.059485518 0.060239314 0.060471079 0.061436145 0.061678577 0.064546535 0.064601674 0.065526964 0.067694946 0.067960035 0.069196448 0.071585867 0.072647182 0.076354072 0.076912551 0.080003355 0.080943044 0.082078427 0.086284345 0.089450927 0.090799702 0.092574566 0.092837501 0.094161743 0.095114015 0.095285961 0.095862637 0.096359057 0.096852178 0.097704293 0.098147634 0.099238993 0.099433114 0.099980465 0.101230961 0.101955985 0.102644554 0.103666102 0.104208059 0.105018195 0.106503959 0.107314199 0.107846287 0.108670190 0.110120367 0.112551473 0.113337820 0.116022335 0.116459159 0.117144795 0.119411220 0.122725530 0.125536228 0.127577724 0.128181085 0.131079691 0.133027665 0.135105797 0.136685526 0.141957828 0.144238613 0.144621303 0.145699707 0.146686401 0.147476275 0.152479425 0.157233537 0.159716451 0.169704582 0.173846540 0.174625186 0.180356892 0.183144051 0.184633751 0.185290447 0.188023649 0.189465967 0.199829598 0.201750662 0.203273316 0.204619748 0.206772672 0.207126359 0.208875448 0.209515338 0.212239853 0.215090704 0.216462219 0.224677713 0.231447836 0.232375930 0.232965303 0.234902128 0.243968928 0.247997514 0.254233474 0.254982480 0.256667450 0.258669270 0.271367120 0.276161334 0.289386072 0.295184796 0.296985633 0.299146596 0.303760464 0.305846033 0.307519106 0.310665855 0.320010057 0.321769787 0.324623938 0.327585264 0.344194459 0.346173165 0.346633067 0.350413222 0.354644261 0.357906999 0.358904618 0.363817706 0.366587279 0.379835349 0.404313587 0.424710148 0.430016458 0.444296644 0.462399609 0.462984481 0.473276945 0.474608037 0.477886156 0.479420049 0.498017995 0.505576881 0.540756269 0.559684544 0.566698012 0.569433325 0.583210024 0.598039498 0.604134357 0.632963769 0.642771822 0.665254919 0.670023146 0.674343740 0.681277301 0.684355416 0.690637712 0.691585636 0.704240257 0.704733525 0.713445602 0.737027775 0.750678806 0.771569948 0.775823328 0.797855019 0.804071301 0.810591454 0.814461708 0.816104536 0.819368107 0.820134494 0.825963190 0.829323821 0.830453372 0.835027973 0.840487658 0.842048202 0.844582020 0.848591303 0.856389214 0.859234072 0.867332033 0.871635261 0.874886746 0.886482018 0.887695490 0.893543058 0.914727289 0.923898261 0.930840567 0.933610686 0.958344066 0.969106825 0.975819498 0.989116145 0.999612137 1.012914157 1.034005275 1.042602136 1.049150621 1.055207982 1.072718623 1.084180852 1.088639671 1.109989505 1.110584461 1.116089709 1.122411205 1.123318272 1.133999284 1.142159295 1.161138167 1.168703596 1.172568673 1.173185988 1.200369351 1.203625951 1.214298544 1.236711503 1.247529406 1.291698566 1.295693369 1.314022711 1.326037291 1.326393146 1.330133676 1.332479157 1.334418258 1.340914403 1.345755279 1.362010120 1.377186136 1.378844871 1.380938194 1.381559420 1.557325538 1.661592674 1.671870886</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">5</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0722524" y3="-0.93803091" z3="-0.53878645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78497452" y3="-1.9186125" z3="-1.36195285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25516047" y3="-0.96905356" z3="-1.23789507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88528625" y3="1.48566622" z3="-0.96108223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41699765" y3="0.31903118" z3="-0.3820553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72596766" y3="2.65620791" z3="-1.19548132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05917284" y3="2.72128349" z3="-0.82903157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34463519" y3="4.95971589" z3="-0.62998327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83591433" y3="3.76458936" z3="-1.08078215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.68918374" y3="5.83247137" z3="-0.54905361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21740134" y3="1.47800239" z3="-1.65217136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24587264" y3="0.34917489" z3="0.31758221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84294092" y3="0.29982386" z3="-0.55444083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71930334" y3="0.6562199" z3="0.34551172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.83077965" y3="-0.96968501" z3="-1.37869281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08134799" y3="-2.49182297" z3="-1.28697365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9440124" y3="-5.27780744" z3="-6.37901626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.68238176" y3="-4.88241098" z3="-5.39333662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99617883" y3="-3.84207385" z3="-2.88960824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6821587" y3="-3.50897904" z3="-5.18205942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36986642" y3="-5.75183486" z3="-4.34591624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04145233" y3="-5.22565756" z3="-3.10192849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.34922728" y3="-2.95867912" z3="-3.93519897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93498802" y3="-2.8097628" z3="-5.98294181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.39547055" y3="-6.83479453" z3="-4.49112352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83286455" y3="-5.89201796" z3="-2.26047839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59455549" y3="-3.34145346" z3="-1.62558188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.45223157" y3="-3.80879999" z3="-0.93426937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.84583191" y3="-4.76804103" z3="-1.28239588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.51333959" y3="-3.61169607" z3="0.53163317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.71330957" y3="-3.32608116" z3="3.31181646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.01942064" y3="-4.65442733" z3="1.31860693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10918024" y3="-2.42369012" z3="1.15132758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21167389" y3="-2.28354411" z3="2.53256364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.11258576" y3="-4.51523942" z3="2.70083172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.31088517" y3="-5.59700403" z3="0.8464716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2691505" y3="-1.57631945" z3="0.57665622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11207442" y3="-1.34513195" z3="2.99150555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.479469" y3="-5.34882041" z3="3.30574769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.78119861" y3="-3.21914199" z3="4.39833525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32981359" y3="-1.62425061" z3="-3.83262313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52437897" y3="-1.28944978" z3="-2.91174933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38694402" y3="3.55717028" z3="-1.33436764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14450726" y3="-2.75912406" z3="-1.73030266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9881365" y3="-3.01466585" z3="-0.64673031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1077374" y3="-2.26079626" z3="0.39370616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.76941646" y3="-0.76998611" z3="0.98982639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.20099071" y3="-0.37687425" z3="-0.14040307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.46317669" y3="0.54651898" z3="1.04127358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.29952848" y3="-1.26301446" z3="2.71281702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.6047755" y3="-4.1869655" z3="-0.59223657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.41540775" y3="-4.49067642" z3="0.5319194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.86528106" y3="-0.14190306" z3="-1.16607961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.73705654" y3="0.51753895" z3="0.22366009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.92157921" y3="-1.21291829" z3="-0.1884682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.0767061" y3="0.82941544" z3="0.050305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.58262351" y3="0.24222691" z3="1.63117648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.89686575" y3="1.45207739" z3="1.50547723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.68319743" y3="-0.39099241" z3="3.27213074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.09152795" y3="-2.03183669" z3="2.696519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.43481486" y3="-1.67099802" z3="3.26675281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.29485434" y3="-3.82570592" z3="0.56566744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.8430613" y3="-4.39868772" z3="1.46813119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.74440149" y3="-5.52825463" z3="0.38577881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40512729" y3="-2.17865273" z3="-0.0633236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18383783" y3="-3.22293212" z3="-0.97183994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45251274" y3="-4.34685405" z3="-0.60636465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95393772" y3="-4.42343515" z3="0.68901126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19330319" y3="-3.42572913" z3="1.62977543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91335214" y3="-2.30203224" z3="1.24456901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53728644" y3="-3.12562787" z3="-2.00158013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.23947803" y3="-5.13894551" z3="-1.32502235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.11453628" y3="-5.56341298" z3="1.06632005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78683969" y3="-3.52560416" z3="2.6368849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.0731221" y3="-1.49458916" z3="1.96118685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54370963" y3="3.97277962" z3="-0.37225652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.89193257" y3="3.66489397" z3="-0.50037685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30309843" y3="2.92069798" z3="-1.60130407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41462023" y3="2.53809751" z3="-2.60276174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07331622" y3="2.86914325" z3="-2.46803467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1953801" y3="4.49352737" z3="0.52316966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61555546" y3="3.94924791" z3="0.26379877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69225808" y3="2.46031832" z3="-1.66787899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.7729304" y3="1.96716802" z3="-3.45994539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63377685" y3="2.55096598" z3="-3.23505086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.93221004" y3="-5.76834422" z3="2.24549248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63409062" y3="-6.23390411" z3="0.17149387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00401071" y3="1.72901459" z3="-2.58740022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44966583" y3="2.80840925" z3="-0.78571761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79169912" y3="0.19674498" z3="-1.84464241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08465078" y3="1.43108471" z3="-1.74641263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99505456" y3="0.13803024" z3="-2.60034369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46723905" y3="1.24363393" z3="-3.26313652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53295731" y3="-0.81345035" z3="-2.65492709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39099104" y3="1.1857398" z3="-3.84551532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58252815" y3="2.54795294" z3="-2.47488716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74099868" y3="2.45721688" z3="-3.20880369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02894249" y3="3.48857272" z3="-2.45539167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10071897" y3="3.32968095" z3="-3.76158681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56165105" y3="3.95025992" z3="-0.28802852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70040477" y3="5.08538025" z3="-0.22836229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88023694" y3="4.07947648" z3="0.23157445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33093025" y3="5.27759651" z3="0.73153466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53815498" y3="3.20812872" z3="0.23838328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.3476255" y3="5.35065836" z3="1.12791095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20090587" y3="6.31551885" z3="0.2809686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48895887" y3="6.41554344" z3="0.74523323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53288996" y3="7.18198418" z3="0.30747783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86152082" y3="7.36522453" z3="1.13910645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38539999" y3="-3.53026347" z3="-3.01142512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.6652932" y3="-4.57877092" z3="-2.82676404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19999162" y3="-3.059613" z3="-3.59358578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48323195" y3="-3.51683082" z3="-3.64298282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61527101" y3="-1.35705408" z3="-1.89938163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39906835" y3="-0.67226037" z3="-2.27670363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.21296534" y3="-0.93380942" z3="-0.96613713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79604422" y3="-1.35533057" z3="-2.63658849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0723,-.938,-.5388;6.785,-1.9186,-1.362;6.2552,-.9691,-1.2379;4.8853,1.4857,-.9611;4.417,.319,-.3821;2.726,2.6562,-1.1955;4.0592,2.7213,-.829;2.3446,4.9597,-.63;1.8359,3.7646,-1.0808;1.6892,5.8325,-.5491;2.2174,1.478,-1.6522;3.2459,.3492,.3176;1.8429,.2998,-.5544;.7193,.6562,.3455;1.8308,-.9697,-1.3787;1.0813,-2.4918,-1.287;1.944,-5.2778,-6.379;1.6824,-4.8824,-5.3933;.9962,-3.8421,-2.8896;1.6822,-3.509,-5.1821;1.3699,-5.7518,-4.3459;1.0415,-5.2257,-3.1019;1.3492,-2.9587,-3.9352;1.935,-2.8098,-5.9829;1.3955,-6.8348,-4.4911;.8329,-5.892,-2.2605;.5946,-3.3415,-1.6256;-.4522,-3.8088,-.9343;-.8458,-4.768,-1.2824;-.5133,-3.6117,.5316;-.7133,-3.3261,3.3118;-1.0194,-4.6544,1.3186;-.1092,-2.4237,1.1513;-.2117,-2.2835,2.5326;-1.1126,-4.5152,2.7008;-1.3109,-5.597,.8465;.2692,-1.5763,.5767;.1121,-1.3451,2.9915;-1.4795,-5.3488,3.3057;-.7812,-3.2191,4.3983;1.3298,-1.6243,-3.8326;1.5244,-1.2894,-2.9117;.3869,3.5572,-1.3344;-2.1445,-2.7591,-1.7303;-2.9881,-3.0147,-.6467;-3.1077,-2.2608,.3937;-3.7694,-.77,.9898;-5.201,-.3769,-.1404;-2.4632,.5465,1.0413;-4.2995,-1.263,2.7128;-3.6048,-4.187,-.5922;-4.4154,-4.4907,.5319;-4.8653,-.1419,-1.1661;-5.7371,.5175,.2237;-5.9216,-1.2129,-.1885;-2.0767,.8294,.0503;-1.5826,.2422,1.6312;-2.8969,1.4521,1.5055;-4.6832,-.391,3.2721;-5.0915,-2.0318,2.6965;-3.4348,-1.671,3.2668;-5.2949,-3.8257,.5657;-3.8431,-4.3987,1.4681;-4.7444,-5.5283,.3858;4.4051,-2.1787,-.0633;4.1838,-3.2229,-.9718;3.4525,-4.3469,-.6064;2.9539,-4.4234,.689;3.1933,-3.4257,1.6298;3.9134,-2.302,1.2446;4.5373,-3.1256,-2.0016;3.2395,-5.1389,-1.325;2.1145,-5.5634,1.0663;2.7868,-3.5256,2.6369;4.0731,-1.4946,1.9612;-.5437,3.9728,-.3723;-1.8919,3.6649,-.5004;-2.3031,2.9207,-1.6013;-1.4146,2.5381,-2.6028;-.0733,2.8691,-2.468;-.1954,4.4935,.5232;-2.6156,3.9492,.2638;-3.6923,2.4603,-1.6679;-1.7729,1.9672,-3.4599;.6338,2.551,-3.2351;1.9322,-5.7683,2.2455;1.6341,-6.2339,.1715;-4.004,1.729,-2.5874;-4.4497,2.8084,-.7857;6.7917,.1967,-1.8446;6.0847,1.4311,-1.7464;7.9951,.138,-2.6003;8.4672,1.2436,-3.2631;8.533,-.8135,-2.6549;9.391,1.1857,-3.8455;6.5825,2.548,-2.4749;7.741,2.4572,-3.2088;6.0289,3.4886,-2.4554;8.1007,3.3297,-3.7616;4.5617,3.9503,-.288;3.7004,5.0854,-.2284;5.8802,4.0795,.2316;6.3309,5.2776,.7315;6.5382,3.2081,.2384;7.3476,5.3507,1.1279;4.2009,6.3155,.281;5.489,6.4155,.7452;3.5329,7.182,.3075;5.8615,7.3652,1.1391;-2.3854,-3.5303,-3.0114;-2.6653,-4.5788,-2.8268;-3.2,-3.0596,-3.5936;-1.4832,-3.5168,-3.643;-1.6153,-1.3571,-1.8994;-2.3991,-.6723,-2.2767;-1.213,-.9338,-.9661;-.796,-1.3553,-2.6366;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661757325337</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000384926267 0.000053055529 0.032993262159 0.005340922807</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659187 0.000018852 0.000043518 0.000144197 0.000163690 0.000221744 0.000291688 0.000364397 0.000401976 0.000488263 0.000570967 0.000645843 0.000724353 0.000754819 0.000828758 0.000877684 0.000940499 0.001061383 0.001115146 0.001173048 0.001220201 0.001312820 0.001403446 0.001412724 0.001452234 0.001619963 0.001739161 0.001852345 0.002100720 0.002175487 0.002977795 0.003083086 0.003183934 0.003512497 0.003891379 0.004174703 0.004295036 0.004350042 0.004783228 0.005291488 0.005559781 0.005872619 0.006102847 0.006535272 0.006765367 0.007258011 0.007534967 0.007871272 0.008170137 0.009224139 0.009335051 0.010107092 0.010276308 0.012419265 0.012747133 0.013221665 0.014228948 0.014584901 0.014889334 0.015273970 0.015732357 0.015851169 0.016120711 0.016396118 0.017310866 0.017953940 0.018373734 0.020281883 0.021024240 0.022189132 0.022996155 0.023194459 0.024498583 0.024910296 0.025948078 0.026462733 0.026721164 0.027760395 0.028850712 0.029682288 0.030412173 0.030995346 0.031838834 0.032666989 0.033666106 0.037020711 0.037678560 0.038338835 0.039091391 0.040064782 0.040756865 0.043125712 0.045258082 0.046123435 0.047085410 0.048077010 0.049669421 0.050666010 0.051321673 0.051556709 0.051799809 0.052281414 0.052386738 0.052539731 0.053793214 0.054709001 0.056491766 0.056836723 0.056958217 0.057203723 0.057572208 0.058382239 0.059197056 0.059485496 0.060239290 0.060471098 0.061436156 0.061678567 0.064546535 0.064601673 0.065526970 0.067694973 0.067960018 0.069196430 0.071585867 0.072647182 0.076354087 0.076912574 0.080003355 0.080943116 0.082078427 0.086284346 0.089450926 0.090799701 0.092574567 0.092837494 0.094161743 0.095114013 0.095285958 0.095862638 0.096359051 0.096852168 0.097704284 0.098147553 0.099238763 0.099433107 0.099980499 0.101230957 0.101955975 0.102644558 0.103665826 0.104207996 0.105018241 0.106504000 0.107314211 0.107846259 0.108670200 0.110120365 0.112551471 0.113337823 0.116022324 0.116459158 0.117144794 0.119411274 0.122725527 0.125536209 0.127577685 0.128181079 0.131079760 0.133027647 0.135105795 0.136685513 0.141957830 0.144239454 0.144622265 0.145699708 0.146686384 0.147476293 0.152479427 0.157233535 0.159716435 0.169704582 0.173846564 0.174625197 0.180356889 0.183144036 0.184632741 0.185290382 0.188023658 0.189465566 0.199826717 0.201750495 0.203273317 0.204619699 0.206772670 0.207126358 0.208875448 0.209515342 0.212239848 0.215090704 0.216462128 0.224677713 0.231447821 0.232375926 0.232965290 0.234902127 0.243968926 0.247997544 0.254233475 0.254982471 0.256667449 0.258669266 0.271367121 0.276161334 0.289386072 0.295184792 0.296985292 0.299146582 0.303760464 0.305846033 0.307519104 0.310665639 0.320010057 0.321769784 0.324623919 0.327585264 0.344194438 0.346173256 0.346633190 0.350413221 0.354644261 0.357907075 0.358904624 0.363817712 0.366589425 0.379835360 0.404313561 0.424710334 0.430016455 0.444296650 0.462399605 0.462984480 0.473276854 0.474608072 0.477886154 0.479420017 0.498017998 0.505576862 0.540756263 0.559684402 0.566698013 0.569433308 0.583210031 0.598037811 0.604134358 0.632963515 0.642771807 0.665254922 0.670023134 0.674343770 0.681277304 0.684354877 0.690637398 0.691585603 0.704240258 0.704733525 0.713445585 0.737027774 0.750678807 0.771569947 0.775823328 0.797854820 0.804071305 0.810591018 0.814461064 0.816104171 0.819367923 0.820134437 0.825962314 0.829323801 0.830453368 0.835027163 0.840487657 0.842048220 0.844581985 0.848591224 0.856389200 0.859234061 0.867332032 0.871635258 0.874886744 0.886481968 0.887695461 0.893543058 0.914727277 0.923898262 0.930840549 0.933610666 0.958344054 0.969106813 0.975819499 0.989116138 0.999612137 1.012914160 1.034005273 1.042602134 1.049150605 1.055207981 1.072718623 1.084180852 1.088639671 1.109989505 1.110584462 1.116089693 1.122411204 1.123318272 1.133999248 1.142159185 1.161138158 1.168703596 1.172568665 1.173185988 1.200369351 1.203625949 1.214298016 1.236710511 1.247529307 1.291698545 1.295693369 1.314022711 1.326037289 1.326393144 1.330133676 1.332479063 1.334418239 1.340914341 1.345755287 1.362010109 1.377186129 1.378844870 1.380938193 1.381559419 1.557325531 1.661592601 1.671870882</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">6</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.07191107" y3="-0.93804213" z3="-0.53997037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78506807" y3="-1.91861455" z3="-1.36221979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25538156" y3="-0.96898703" z3="-1.23813767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88593099" y3="1.48590324" z3="-0.96102425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41677574" y3="0.31903878" z3="-0.38307246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72717359" y3="2.65710849" z3="-1.19605206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06015512" y3="2.72171282" z3="-0.82878241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34553764" y3="4.95997566" z3="-0.62824983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83698573" y3="3.76523563" z3="-1.08023476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.6899643" y3="5.83256055" z3="-0.54645237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21888945" y3="1.47940211" z3="-1.65439125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24502174" y3="0.34893618" z3="0.31557971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84281478" y3="0.30079044" z3="-0.55773568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71842746" y3="0.65748656" z3="0.34122771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.83077583" y3="-0.96836257" z3="-1.3825172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0809712" y3="-2.49029838" z3="-1.2883324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.93214736" y3="-5.27527559" z3="-6.38292472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.67304184" y3="-4.88017258" z3="-5.39646665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99306945" y3="-3.8405948" z3="-2.89069985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67200681" y3="-3.50674532" z3="-5.18516342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36452561" y3="-5.74991951" z3="-4.34813785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03918329" y3="-5.22412101" z3="-3.10318055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.34215845" y3="-2.95685162" z3="-3.93733186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92171267" y3="-2.80722703" z3="-5.98675979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.39079831" y3="-6.83284701" z3="-4.49346096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83355594" y3="-5.89067942" z3="-2.26116033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59411214" y3="-3.34039458" z3="-1.62564552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.45105263" y3="-3.80836242" z3="-0.93215269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.84383821" y3="-4.76855086" z3="-1.27865125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.50955953" y3="-3.61033519" z3="0.5337987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.70574477" y3="-3.32249915" z3="3.31405261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.01188624" y3="-4.65351548" z3="1.32261915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10709011" y3="-2.42083379" z3="1.15168678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.207682" y3="-2.27959071" z3="2.53295471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.10313155" y3="-4.51321892" z3="2.7048795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.30182417" y3="-5.59727935" z3="0.85191116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26820194" y3="-1.57302378" z3="0.57563777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11480863" y3="-1.34004469" z3="2.99045663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.46706576" y3="-5.34711176" z3="3.31118432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.77219666" y3="-3.21463915" z3="4.40057803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32147892" y3="-1.62242185" z3="-3.83468598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5191848" y3="-1.2876064" z3="-2.91447776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38802322" y3="3.55756045" z3="-1.33362819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14557994" y3="-2.76245946" z3="-1.72549331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98678549" y3="-3.01823999" z3="-0.63989842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10664718" y3="-2.26307368" z3="0.39979135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.77196392" y3="-0.76906447" z3="0.9848536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.19270172" y3="-0.37941887" z3="-0.16006309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.46387567" y3="0.5452885" z3="1.04619682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.31846747" y3="-1.25507309" z3="2.70486603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.60040539" y3="-4.19187647" z3="-0.58273007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.4089967" y3="-4.4958232" z3="0.54286789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.84785811" y3="-0.1557749" z3="-1.18541408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.72733683" y3="0.52129483" z3="0.19066683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.91648008" y3="-1.21275183" z3="-0.20591647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.06686929" y3="0.8285668" z3="0.05985214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.59048525" y3="0.23820189" z3="1.64422709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.89914007" y3="1.4510115" z3="1.50751269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.70795212" y3="-0.3806118" z3="3.25649861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.11010577" y3="-2.02417917" z3="2.68439613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.45903239" y3="-1.66014324" z3="3.26929141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.29049448" y3="-3.83355972" z3="0.57595943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.83605561" y3="-4.40000444" z3="1.47829909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.73478633" y3="-5.5347368" z3="0.39918861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40456485" y3="-2.17892175" z3="-0.0654987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1834836" y3="-3.22253192" z3="-0.97483772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45297836" y3="-4.34718851" z3="-0.61003136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95522718" y3="-4.42527887" z3="0.68557316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19408871" y3="-3.42809629" z3="1.62700837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91307698" y3="-2.30349983" z3="1.24237658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53660187" y3="-3.12416205" z3="-2.00458571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24009031" y3="-5.13878735" z3="-1.32928342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.11722609" y3="-5.56639198" z3="1.06240419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78808937" y3="-3.52908138" z3="2.63420246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07249998" y3="-1.4964689" z3="1.95954492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.54233683" y3="3.97076634" z3="-0.37021987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8904691" y3="3.66248512" z3="-0.49831075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30182946" y3="2.92043961" z3="-1.60061826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41358931" y3="2.53999274" z3="-2.60311289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07234949" y3="2.87124256" z3="-2.46826409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.19380038" y3="4.48998938" z3="0.52601181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61389757" y3="3.94523411" z3="0.26663483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69136256" y3="2.46135651" z3="-1.66874225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77209908" y3="1.97072802" z3="-3.46132249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63462105" y3="2.55466075" z3="-3.23606002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.937693" y3="-5.77390576" z3="2.24155965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63498522" y3="-6.23519508" z3="0.16722875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00447899" y3="1.73581876" z3="-2.59218007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44788741" y3="2.80525971" z3="-0.78413193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79267841" y3="0.19697108" z3="-1.84387653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08585975" y3="1.43142183" z3="-1.7455011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99657748" y3="0.1383408" z3="-2.59872208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46950215" y3="1.24416273" z3="-3.26062097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53428768" y3="-0.81324558" z3="-2.65338873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39365995" y3="1.18634158" z3="-3.8423648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58452441" y3="2.54853504" z3="-2.47307689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74349488" y3="2.45788733" z3="-3.20621456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03113771" y3="3.48927195" z3="-2.45353136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10380447" y3="3.33053451" z3="-3.75832742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56252041" y3="3.95025079" z3="-0.28666214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70128792" y3="5.08536624" z3="-0.22643963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88096365" y3="4.07907992" z3="0.23340595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33161632" y3="5.27689325" z3="0.73414501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53884509" y3="3.20770316" z3="0.23987644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34823237" y3="5.3496733" z3="1.13077949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20174032" y3="6.31517792" z3="0.28372958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.48971452" y3="6.41488561" z3="0.74828499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53375875" y3="7.18165985" z3="0.31059944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86225837" y3="7.36433794" z3="1.14273003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38838381" y3="-3.53503541" z3="-3.00540912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66533987" y3="-4.58405955" z3="-2.8192006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20576035" y3="-3.0666633" z3="-3.58550179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48805317" y3="-3.51997555" z3="-3.63957189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61900467" y3="-1.35968274" z3="-1.89720872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40416426" y3="-0.6766884" z3="-2.27487173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.21638233" y3="-0.9344508" z3="-0.96501783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80054145" y3="-1.35760754" z3="-2.63524673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0719,-.938,-.54;6.7851,-1.9186,-1.3622;6.2554,-.969,-1.2381;4.8859,1.4859,-.961;4.4168,.319,-.3831;2.7272,2.6571,-1.1961;4.0602,2.7217,-.8288;2.3455,4.96,-.6282;1.837,3.7652,-1.0802;1.69,5.8326,-.5465;2.2189,1.4794,-1.6544;3.245,.3489,.3156;1.8428,.3008,-.5577;.7184,.6575,.3412;1.8308,-.9684,-1.3825;1.081,-2.4903,-1.2883;1.9321,-5.2753,-6.3829;1.673,-4.8802,-5.3965;.9931,-3.8406,-2.8907;1.672,-3.5067,-5.1852;1.3645,-5.7499,-4.3481;1.0392,-5.2241,-3.1032;1.3422,-2.9569,-3.9373;1.9217,-2.8072,-5.9868;1.3908,-6.8328,-4.4935;.8336,-5.8907,-2.2612;.5941,-3.3404,-1.6256;-.4511,-3.8084,-.9322;-.8438,-4.7686,-1.2787;-.5096,-3.6103,.5338;-.7057,-3.3225,3.3141;-1.0119,-4.6535,1.3226;-.1071,-2.4208,1.1517;-.2077,-2.2796,2.533;-1.1031,-4.5132,2.7049;-1.3018,-5.5973,.8519;.2682,-1.573,.5756;.1148,-1.34,2.9905;-1.4671,-5.3471,3.3112;-.7722,-3.2146,4.4006;1.3215,-1.6224,-3.8347;1.5192,-1.2876,-2.9145;.388,3.5576,-1.3336;-2.1456,-2.7625,-1.7255;-2.9868,-3.0182,-.6399;-3.1066,-2.2631,.3998;-3.772,-.7691,.9849;-5.1927,-.3794,-.1601;-2.4639,.5453,1.0462;-4.3185,-1.2551,2.7049;-3.6004,-4.1919,-.5827;-4.409,-4.4958,.5429;-4.8479,-.1558,-1.1854;-5.7273,.5213,.1907;-5.9165,-1.2128,-.2059;-2.0669,.8286,.0599;-1.5905,.2382,1.6442;-2.8991,1.451,1.5075;-4.708,-.3806,3.2565;-5.1101,-2.0242,2.6844;-3.459,-1.6601,3.2693;-5.2905,-3.8336,.576;-3.8361,-4.4,1.4783;-4.7348,-5.5347,.3992;4.4046,-2.1789,-.0655;4.1835,-3.2225,-.9748;3.453,-4.3472,-.61;2.9552,-4.4253,.6856;3.1941,-3.4281,1.627;3.9131,-2.3035,1.2424;4.5366,-3.1242,-2.0046;3.2401,-5.1388,-1.3293;2.1172,-5.5664,1.0624;2.7881,-3.5291,2.6342;4.0725,-1.4965,1.9595;-.5423,3.9708,-.3702;-1.8905,3.6625,-.4983;-2.3018,2.9204,-1.6006;-1.4136,2.54,-2.6031;-.0723,2.8712,-2.4683;-.1938,4.49,.526;-2.6139,3.9452,.2666;-3.6914,2.4614,-1.6687;-1.7721,1.9707,-3.4613;.6346,2.5547,-3.2361;1.9377,-5.7739,2.2416;1.635,-6.2352,.1672;-4.0045,1.7358,-2.5922;-4.4479,2.8053,-.7841;6.7927,.197,-1.8439;6.0859,1.4314,-1.7455;7.9966,.1383,-2.5987;8.4695,1.2442,-3.2606;8.5343,-.8132,-2.6534;9.3937,1.1863,-3.8424;6.5845,2.5485,-2.4731;7.7435,2.4579,-3.2062;6.0311,3.4893,-2.4535;8.1038,3.3305,-3.7583;4.5625,3.9503,-.2867;3.7013,5.0854,-.2264;5.881,4.0791,.2334;6.3316,5.2769,.7341;6.5388,3.2077,.2399;7.3482,5.3497,1.1308;4.2017,6.3152,.2837;5.4897,6.4149,.7483;3.5338,7.1817,.3106;5.8623,7.3643,1.1427;-2.3884,-3.535,-3.0054;-2.6653,-4.5841,-2.8192;-3.2058,-3.0667,-3.5855;-1.4881,-3.52,-3.6396;-1.619,-1.3597,-1.8972;-2.4042,-.6767,-2.2749;-1.2164,-.9345,-.965;-.8005,-1.3576,-2.6352;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661768133372</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000391226777 0.000043028361 0.032825280923 0.005339592292</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659091 -0.000073437 0.000045650 0.000130994 0.000171834 0.000224909 0.000292432 0.000368889 0.000402087 0.000488171 0.000589317 0.000649195 0.000724146 0.000754593 0.000828686 0.000877803 0.000941554 0.001067794 0.001116395 0.001173409 0.001221224 0.001315461 0.001403455 0.001412697 0.001453852 0.001625835 0.001739646 0.001854918 0.002103332 0.002182182 0.002977847 0.003083062 0.003184261 0.003512429 0.003891368 0.004174700 0.004295163 0.004350148 0.004783682 0.005292143 0.005560161 0.005872869 0.006102832 0.006535291 0.006765350 0.007257979 0.007535005 0.007871446 0.008170139 0.009224230 0.009335083 0.010107093 0.010276328 0.012419260 0.012747144 0.013221669 0.014228959 0.014584879 0.014889318 0.015273975 0.015732342 0.015851273 0.016120723 0.016396118 0.017310874 0.017954034 0.018373722 0.020281883 0.021024320 0.022189134 0.022996172 0.023194460 0.024498580 0.024910259 0.025948078 0.026462722 0.026721163 0.027760396 0.028850641 0.029682277 0.030412170 0.030995355 0.031838724 0.032666992 0.033665946 0.037020579 0.037678751 0.038337836 0.039091181 0.040064784 0.040756781 0.043125546 0.045258091 0.046123416 0.047085624 0.048076781 0.049669421 0.050666009 0.051321679 0.051556711 0.051799808 0.052281414 0.052386737 0.052539728 0.053793242 0.054709000 0.056491765 0.056836722 0.056958211 0.057203718 0.057572197 0.058382249 0.059197066 0.059485577 0.060239309 0.060471109 0.061436148 0.061678569 0.064546535 0.064601672 0.065526963 0.067694978 0.067960040 0.069196427 0.071585868 0.072647183 0.076354089 0.076912580 0.080003352 0.080943232 0.082078428 0.086284351 0.089450927 0.090799699 0.092574568 0.092837492 0.094161742 0.095114011 0.095285954 0.095862639 0.096359020 0.096852189 0.097704305 0.098147418 0.099238698 0.099433103 0.099980516 0.101230950 0.101955969 0.102644562 0.103665596 0.104207969 0.105018219 0.106503994 0.107314197 0.107846223 0.108670195 0.110120356 0.112551466 0.113337819 0.116022320 0.116459158 0.117144789 0.119411375 0.122725515 0.125536183 0.127577606 0.128181074 0.131079816 0.133027634 0.135105799 0.136685506 0.141957841 0.144241258 0.144624203 0.145699706 0.146686371 0.147476373 0.152479427 0.157233521 0.159716404 0.169704582 0.173846532 0.174625193 0.180356885 0.183144019 0.184631718 0.185290209 0.188023644 0.189465155 0.199823584 0.201750390 0.203273316 0.204619684 0.206772669 0.207126358 0.208875453 0.209515343 0.212239843 0.215090702 0.216462094 0.224677711 0.231447809 0.232375923 0.232965283 0.234902123 0.243968923 0.247997547 0.254233475 0.254982461 0.256667448 0.258669259 0.271367120 0.276161332 0.289386073 0.295184789 0.296985038 0.299146554 0.303760459 0.305846033 0.307519102 0.310665302 0.320010055 0.321769781 0.324623869 0.327585264 0.344194405 0.346173344 0.346633307 0.350413216 0.354644260 0.357907082 0.358904640 0.363817719 0.366592761 0.379835391 0.404313522 0.424710342 0.430016456 0.444296652 0.462399614 0.462984480 0.473276739 0.474608089 0.477886150 0.479419973 0.498017999 0.505576860 0.540756266 0.559684239 0.566698010 0.569433304 0.583210037 0.598036805 0.604134358 0.632963140 0.642771797 0.665254924 0.670023134 0.674343871 0.681277307 0.684355784 0.690637544 0.691585611 0.704240258 0.704733523 0.713445573 0.737027773 0.750678807 0.771569947 0.775823327 0.797854820 0.804071278 0.810589858 0.814459968 0.816103837 0.819367781 0.820134376 0.825961833 0.829323804 0.830453363 0.835022816 0.840487655 0.842046863 0.844581948 0.848591179 0.856389200 0.859234063 0.867332032 0.871635256 0.874886738 0.886481957 0.887695451 0.893543056 0.914727256 0.923898262 0.930840552 0.933610669 0.958344057 0.969106806 0.975819499 0.989116132 0.999612137 1.012914166 1.034005273 1.042602134 1.049150611 1.055207982 1.072718594 1.084180851 1.088639671 1.109989505 1.110584462 1.116089690 1.122411205 1.123318272 1.133999232 1.142159135 1.161138157 1.168703595 1.172568664 1.173185988 1.200369350 1.203625946 1.214297816 1.236710056 1.247529000 1.291698516 1.295693369 1.314022711 1.326037288 1.326393141 1.330133659 1.332479042 1.334418228 1.340914307 1.345755292 1.362010074 1.377186118 1.378844870 1.380938193 1.381559418 1.557325519 1.661592335 1.671870876</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">7</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.07096771" y3="-0.93797101" z3="-0.54180812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78446224" y3="-1.9187821" z3="-1.36306161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25498347" y3="-0.96902878" z3="-1.23905946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88628356" y3="1.48621487" z3="-0.96178199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41605781" y3="0.31920229" z3="-0.38492706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72829284" y3="2.65833329" z3="-1.1975727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06101263" y3="2.72231457" z3="-0.8293387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34642474" y3="4.96037398" z3="-0.62665289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83797731" y3="3.76616029" z3="-1.08013354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69072648" y3="5.83274699" z3="-0.54358965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.22037813" y3="1.481267" z3="-1.6580165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24351156" y3="0.34900938" z3="0.3124509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84235956" y3="0.30203664" z3="-0.56271376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71681215" y3="0.65895353" z3="0.33475267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.8309444" y3="-0.96675769" z3="-1.38804749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08095503" y3="-2.48864104" z3="-1.29054988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.92341155" y3="-5.27615633" z3="-6.38536533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.66618464" y3="-4.88060548" z3="-5.39860513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99087146" y3="-3.83988426" z3="-2.89203671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.66451807" y3="-3.50704336" z3="-5.18820645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36067639" y3="-5.74988215" z3="-4.3490257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03763996" y3="-5.2235107" z3="-3.10371738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33696605" y3="-2.95659679" z3="-3.9400352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91188405" y3="-2.80784131" z3="-5.99079078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.38745853" y3="-6.8328831" z3="-4.49369536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83424387" y3="-5.88968217" z3="-2.26086152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59389199" y3="-3.33916153" z3="-1.62655271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44987025" y3="-3.8073971" z3="-0.93107442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.84198789" y3="-4.76848107" z3="-1.27586551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.50613037" y3="-3.60826679" z3="0.53490547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.69724427" y3="-3.31941073" z3="3.31541281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-1.00429691" y3="-4.65222229" z3="1.32534965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10560651" y3="-2.41726919" z3="1.15123158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.20345867" y3="-2.27568944" z3="2.53265732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.09304294" y3="-4.51140751" z3="2.70773479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.29271481" y3="-5.59704485" z3="0.85582919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26599597" y3="-1.56852645" z3="0.57409014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11791404" y3="-1.33519472" z3="2.98899609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.45365467" y3="-5.34588779" z3="3.31521083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.76158783" y3="-3.21114173" z3="4.40201948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31531931" y3="-1.62210884" z3="-3.83825081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51534676" y3="-1.28663403" z3="-2.9187733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38890719" y3="3.55823177" z3="-1.33261215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14623706" y3="-2.76497775" z3="-1.72266182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98532723" y3="-3.0201343" z3="-0.63527788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10511563" y3="-2.26306903" z3="0.40315574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.77542304" y3="-0.76793945" z3="0.98006195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.18640038" y3="-0.3809357" z3="-0.17725259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.46686714" y3="0.54571118" z3="1.05440223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.33706667" y3="-1.25001885" z3="2.69627458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.59652356" y3="-4.19479982" z3="-0.57507964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.40331794" y3="-4.49827024" z3="0.55195493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.83430521" y3="-0.16802298" z3="-1.20218228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.71825836" y3="0.52563956" z3="0.16206602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.91393565" y3="-1.21126123" z3="-0.22044588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.04575496" y3="0.820059" z3="0.07412058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.60775166" y3="0.24124629" z3="1.67705237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91264158" y3="1.45612822" z3="1.49875167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.72843695" y3="-0.37376187" z3="3.24313121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.13039407" y3="-2.01719413" z3="2.67147439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.4832522" y3="-1.6558295" z3="3.26814814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.28660279" y3="-3.83835216" z3="0.58410055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.82986581" y3="-4.39863061" z3="1.48666813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.7263718" y3="-5.53841641" z3="0.41101613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40341887" y3="-2.17892527" z3="-0.06781014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18243105" y3="-3.22232046" z3="-0.97741136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45304741" y3="-4.34767512" z3="-0.61251947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95645314" y3="-4.42672595" z3="0.6834712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19479802" y3="-3.42950155" z3="1.62497998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91248059" y3="-2.30411455" z3="1.24020395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53496692" y3="-3.12335298" z3="-2.00729532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24036496" y3="-5.13922566" z3="-1.33189007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.12052454" y3="-5.56915732" z3="1.06080355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78956257" y3="-3.53117824" z3="2.63241103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07163819" y3="-1.49713534" z3="1.95749525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.5405342" y3="3.96908534" z3="-0.36732868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88859081" y3="3.6601045" z3="-0.49429891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30082321" y3="2.91989988" z3="-1.59749286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41354387" y3="2.54180776" z3="-2.60174815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07232061" y3="2.8735063" z3="-2.46783512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.191254" y3="4.48702202" z3="0.52934733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61131693" y3="3.94146686" z3="0.27181137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.6906413" y3="2.4619172" z3="-1.66595255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77281215" y3="1.97417123" z3="-3.46071276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63400655" y3="2.5585926" z3="-3.23691745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.94337755" y3="-5.77794073" z3="2.24006903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.6375638" y3="-6.23782496" z3="0.16596173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00618792" y3="1.74318893" z3="-2.59381512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44528872" y3="2.80059385" z3="-0.77746394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.7931712" y3="0.19699194" z3="-1.84387425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08678944" y3="1.43166583" z3="-1.74533397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99758376" y3="0.13829335" z3="-2.5978976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47140268" y3="1.24428636" z3="-3.2588726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53496205" y3="-0.81347174" z3="-2.65269758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39593855" y3="1.18641374" z3="-3.84000947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58640544" y3="2.54898772" z3="-2.47194222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74584411" y3="2.45827687" z3="-3.20432261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03335698" y3="3.48992302" z3="-2.45227326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10687968" y3="3.33107502" z3="-3.75572324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56332568" y3="3.95022616" z3="-0.28575716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70216671" y3="5.08536211" z3="-0.22469288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88160875" y3="4.07845313" z3="0.23487061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33224684" y3="5.27578956" z3="0.73676878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53941112" y3="3.20701522" z3="0.24077608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34876398" y3="5.34812365" z3="1.1337387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2025963" y3="6.31467442" z3="0.28670246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.49046686" y3="6.4138629" z3="0.75165209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53468002" y3="7.18118856" z3="0.31417136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86301142" y3="7.36294585" z3="1.14698705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39063946" y3="-3.53956909" z3="-3.00112897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66551901" y3="-4.58880866" z3="-2.81302119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21005004" y3="-3.07316119" z3="-3.57996516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49172214" y3="-3.52388399" z3="-3.63730071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.62150207" y3="-1.3619008" z3="-1.89757213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40743898" y3="-0.68061377" z3="-2.27662562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.2191485" y3="-0.93435011" z3="-0.96637963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80318318" y3="-1.36031238" z3="-2.63577633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.071,-.938,-.5418;6.7845,-1.9188,-1.3631;6.255,-.969,-1.2391;4.8863,1.4862,-.9618;4.4161,.3192,-.3849;2.7283,2.6583,-1.1976;4.061,2.7223,-.8293;2.3464,4.9604,-.6267;1.838,3.7662,-1.0801;1.6907,5.8327,-.5436;2.2204,1.4813,-1.658;3.2435,.349,.3125;1.8424,.302,-.5627;.7168,.659,.3348;1.8309,-.9668,-1.388;1.081,-2.4886,-1.2905;1.9234,-5.2762,-6.3854;1.6662,-4.8806,-5.3986;.9909,-3.8399,-2.892;1.6645,-3.507,-5.1882;1.3607,-5.7499,-4.349;1.0376,-5.2235,-3.1037;1.337,-2.9566,-3.94;1.9119,-2.8078,-5.9908;1.3875,-6.8329,-4.4937;.8342,-5.8897,-2.2609;.5939,-3.3392,-1.6266;-.4499,-3.8074,-.9311;-.842,-4.7685,-1.2759;-.5061,-3.6083,.5349;-.6972,-3.3194,3.3154;-1.0043,-4.6522,1.3253;-.1056,-2.4173,1.1512;-.2035,-2.2757,2.5327;-1.093,-4.5114,2.7077;-1.2927,-5.597,.8558;.266,-1.5685,.5741;.1179,-1.3352,2.989;-1.4537,-5.3459,3.3152;-.7616,-3.2111,4.402;1.3153,-1.6221,-3.8383;1.5153,-1.2866,-2.9188;.3889,3.5582,-1.3326;-2.1462,-2.765,-1.7227;-2.9853,-3.0201,-.6353;-3.1051,-2.2631,.4032;-3.7754,-.7679,.9801;-5.1864,-.3809,-.1773;-2.4669,.5457,1.0544;-4.3371,-1.25,2.6963;-3.5965,-4.1948,-.5751;-4.4033,-4.4983,.552;-4.8343,-.168,-1.2022;-5.7183,.5256,.1621;-5.9139,-1.2113,-.2204;-2.0458,.8201,.0741;-1.6078,.2412,1.6771;-2.9126,1.4561,1.4988;-4.7284,-.3738,3.2431;-5.1304,-2.0172,2.6715;-3.4833,-1.6558,3.2681;-5.2866,-3.8384,.5841;-3.8299,-4.3986,1.4867;-4.7264,-5.5384,.411;4.4034,-2.1789,-.0678;4.1824,-3.2223,-.9774;3.453,-4.3477,-.6125;2.9565,-4.4267,.6835;3.1948,-3.4295,1.625;3.9125,-2.3041,1.2402;4.535,-3.1234,-2.0073;3.2404,-5.1392,-1.3319;2.1205,-5.5692,1.0608;2.7896,-3.5312,2.6324;4.0716,-1.4971,1.9575;-.5405,3.9691,-.3673;-1.8886,3.6601,-.4943;-2.3008,2.9199,-1.5975;-1.4135,2.5418,-2.6017;-.0723,2.8735,-2.4678;-.1913,4.487,.5293;-2.6113,3.9415,.2718;-3.6906,2.4619,-1.666;-1.7728,1.9742,-3.4607;.634,2.5586,-3.2369;1.9434,-5.7779,2.2401;1.6376,-6.2378,.166;-4.0062,1.7432,-2.5938;-4.4453,2.8006,-.7775;6.7932,.197,-1.8439;6.0868,1.4317,-1.7453;7.9976,.1383,-2.5979;8.4714,1.2443,-3.2589;8.535,-.8135,-2.6527;9.3959,1.1864,-3.84;6.5864,2.549,-2.4719;7.7458,2.4583,-3.2043;6.0334,3.4899,-2.4523;8.1069,3.3311,-3.7557;4.5633,3.9502,-.2858;3.7022,5.0854,-.2247;5.8816,4.0785,.2349;6.3322,5.2758,.7368;6.5394,3.207,.2408;7.3488,5.3481,1.1337;4.2026,6.3147,.2867;5.4905,6.4139,.7517;3.5347,7.1812,.3142;5.863,7.3629,1.147;-2.3906,-3.5396,-3.0011;-2.6655,-4.5888,-2.813;-3.2101,-3.0732,-3.58;-1.4917,-3.5239,-3.6373;-1.6215,-1.3619,-1.8976;-2.4074,-.6806,-2.2766;-1.2191,-.9344,-.9664;-.8032,-1.3603,-2.6358;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661774406901</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001573704338 0.000166100152 0.027952792484 0.005334461028</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659079 -0.000382212 0.000045367 0.000139630 0.000177058 0.000227761 0.000292413 0.000372918 0.000403028 0.000491078 0.000629832 0.000723994 0.000734226 0.000757165 0.000829732 0.000881996 0.000941382 0.001109179 0.001172176 0.001189235 0.001238870 0.001337865 0.001406763 0.001419065 0.001468291 0.001729496 0.001774018 0.001898664 0.002121767 0.002245211 0.002978467 0.003084632 0.003196597 0.003515457 0.003891368 0.004176912 0.004299698 0.004354518 0.004783550 0.005300952 0.005560049 0.005875065 0.006103608 0.006535346 0.006765454 0.007258000 0.007535185 0.007872020 0.008170158 0.009224599 0.009335289 0.010107200 0.010276316 0.012419449 0.012747222 0.013221667 0.014228956 0.014584904 0.014889442 0.015274012 0.015732567 0.015851823 0.016120778 0.016396212 0.017310911 0.017954490 0.018373715 0.020281884 0.021024376 0.022189146 0.022996185 0.023194497 0.024498585 0.024910521 0.025948092 0.026462708 0.026721164 0.027760396 0.028852803 0.029682469 0.030412183 0.030995373 0.031838569 0.032667025 0.033665796 0.037021342 0.037679787 0.038336758 0.039090980 0.040064784 0.040756780 0.043125406 0.045258109 0.046123420 0.047086566 0.048077805 0.049669421 0.050666012 0.051321709 0.051556725 0.051799809 0.052281415 0.052386738 0.052539728 0.053793279 0.054708999 0.056491766 0.056836723 0.056958217 0.057203713 0.057572195 0.058382236 0.059197099 0.059485688 0.060239408 0.060471103 0.061436149 0.061678561 0.064546538 0.064601665 0.065526969 0.067694974 0.067960057 0.069196382 0.071585871 0.072647183 0.076354091 0.076912580 0.080003507 0.080943642 0.082078428 0.086284357 0.089450944 0.090799714 0.092574567 0.092837494 0.094161780 0.095114016 0.095285952 0.095862648 0.096359004 0.096852244 0.097704357 0.098147803 0.099239825 0.099433116 0.099980547 0.101230971 0.101955959 0.102644564 0.103665818 0.104208346 0.105018323 0.106504012 0.107314214 0.107846333 0.108670249 0.110120352 0.112551587 0.113337907 0.116022821 0.116459204 0.117144795 0.119412021 0.122725511 0.125536180 0.127577715 0.128181150 0.131082134 0.133027655 0.135106161 0.136685495 0.141957911 0.144263445 0.144652600 0.145699705 0.146686418 0.147477728 0.152479433 0.157233512 0.159716705 0.169704581 0.173846697 0.174625239 0.180357067 0.183144103 0.184649950 0.185292398 0.188023899 0.189472293 0.199847143 0.201750850 0.203273327 0.204619971 0.206772684 0.207126359 0.208875466 0.209515345 0.212239862 0.215090710 0.216462280 0.224677711 0.231447823 0.232375927 0.232965282 0.234902123 0.243968923 0.247997556 0.254233474 0.254982461 0.256667449 0.258669252 0.271367124 0.276161337 0.289386079 0.295184800 0.296985125 0.299146576 0.303760492 0.305846032 0.307519108 0.310665500 0.320010057 0.321769784 0.324623863 0.327585275 0.344194476 0.346178735 0.346639630 0.350413313 0.354644259 0.357915780 0.358904663 0.363818389 0.366798087 0.379836829 0.404313659 0.424715362 0.430016464 0.444296750 0.462399971 0.462984500 0.473277521 0.474613225 0.477886149 0.479420052 0.498018046 0.505577169 0.540756737 0.559684553 0.566698011 0.569433504 0.583210299 0.598122119 0.604134358 0.632966832 0.642771864 0.665254926 0.670023300 0.674372651 0.681277697 0.684487712 0.690652432 0.691586279 0.704240261 0.704733547 0.713445707 0.737027774 0.750678807 0.771569950 0.775823332 0.797854812 0.804073313 0.810608441 0.814468510 0.816108357 0.819371191 0.820135511 0.826002811 0.829324405 0.830453370 0.835022456 0.840487653 0.842047143 0.844582154 0.848591174 0.856389408 0.859234379 0.867332038 0.871635300 0.874886774 0.886481964 0.887695449 0.893543062 0.914727280 0.923898262 0.930840583 0.933610669 0.958344064 0.969106859 0.975819499 0.989116125 0.999612137 1.012914282 1.034005274 1.042602167 1.049150622 1.055207988 1.072719081 1.084180852 1.088639675 1.109989506 1.110584461 1.116089761 1.122411205 1.123318271 1.133999231 1.142159128 1.161138177 1.168703596 1.172568671 1.173185988 1.200369351 1.203625949 1.214297869 1.236718095 1.247528941 1.291698570 1.295693369 1.314022731 1.326037306 1.326393146 1.330133689 1.332479811 1.334418222 1.340914312 1.345755352 1.362010049 1.377186140 1.378844870 1.380938192 1.381559420 1.557325990 1.661592300 1.671870906</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">8</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0699968" y3="-0.93822956" z3="-0.54356293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78396602" y3="-1.91900019" z3="-1.36384636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25454335" y3="-0.96920847" z3="-1.23990209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88615442" y3="1.48619386" z3="-0.96238759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41516563" y3="0.31893816" z3="-0.38659733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72859071" y3="2.65917309" z3="-1.1979661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06124562" y3="2.72247362" z3="-0.82936514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34686125" y3="4.96046396" z3="-0.62409317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83832077" y3="3.76681674" z3="-1.07893677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69117361" y3="5.83273182" z3="-0.53986979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.22053964" y3="1.48278544" z3="-1.66010641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24209849" y3="0.34847304" z3="0.30994851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.84153956" y3="0.30268383" z3="-0.56621431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.7155809" y3="0.65927168" z3="0.33097331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.83020241" y3="-0.96548226" z3="-1.3924596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08090988" y3="-2.48774399" z3="-1.29242718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9139496" y3="-5.27692634" z3="-6.38801107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.6587587" y3="-4.88109638" z3="-5.4008198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98846902" y3="-3.8397043" z3="-2.89313649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.65635665" y3="-3.50741762" z3="-5.19112634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35657527" y3="-5.7501095" z3="-4.35003357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03601177" y3="-5.22339504" z3="-3.10421296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33130648" y3="-2.95665171" z3="-3.94243006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90113832" y3="-2.80840561" z3="-5.99468995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.38399884" y3="-6.83316525" z3="-4.49420016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83513145" y3="-5.8892851" z3="-2.26050437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59374518" y3="-3.33873726" z3="-1.62702672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44854728" y3="-3.80729254" z3="-0.92926009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.84010412" y3="-4.76916937" z3="-1.27247348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.50180359" y3="-3.60736898" z3="0.53677267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.68827609" y3="-3.31592261" z3="3.31732442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.9963007" y3="-4.65153574" z3="1.32921371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10229164" y3="-2.41508293" z3="1.15110938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19793595" y3="-2.27207682" z3="2.53253907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.08263266" y3="-4.5094343" z3="2.71165665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.28359467" y3="-5.59746809" z3="0.86124635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26645038" y3="-1.56631159" z3="0.57220696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12236288" y3="-1.33041223" z3="2.98723084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.44026491" y3="-5.34406046" z3="3.32070141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.75088022" y3="-3.20659293" z3="4.40394385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30864754" y3="-1.62210336" z3="-3.84123591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51087913" y3="-1.28607427" z3="-2.92246301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38916332" y3="3.55943746" z3="-1.33143552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14674071" y3="-2.76780193" z3="-1.71773183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98365624" y3="-3.02363831" z3="-0.62852606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10386367" y3="-2.26585308" z3="0.4094614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.77742084" y3="-0.76824414" z3="0.97730174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.17778775" y3="-0.38310847" z3="-0.1940917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.46700171" y3="0.54275677" z3="1.05819477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.35592017" y3="-1.24493515" z3="2.68972285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.59193372" y3="-4.19959452" z3="-0.56610242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.39674112" y3="-4.50337825" z3="0.56232313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.81630073" y3="-0.17884781" z3="-1.21769724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.70982614" y3="0.52760871" z3="0.13411323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.90797663" y3="-1.21113759" z3="-0.23807562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.05747195" y3="0.82901094" z3="0.08014475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.60406774" y3="0.23106044" z3="1.66441107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90307658" y3="1.44713458" z3="1.51796569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.75316637" y3="-0.36645856" z3="3.22963817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.1494866" y3="-2.0117683" z3="2.65900051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.5079937" y3="-1.64911413" z3="3.27225527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.28205975" y3="-3.84613456" z3="0.59379432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.82274734" y3="-4.39989512" z3="1.49628186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.71660472" y3="-5.54483281" z3="0.42381322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40242062" y3="-2.17935625" z3="-0.07008552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18158259" y3="-3.22245206" z3="-0.98006171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45332644" y3="-4.34854081" z3="-0.61519722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95791773" y3="-4.42869451" z3="0.68117831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19584204" y3="-3.43159839" z3="1.62292037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.9121426" y3="-2.30533547" z3="1.23809639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53352567" y3="-3.12276784" z3="-2.0100783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.240801" y3="-5.13994574" z3="-1.33478102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.12371223" y3="-5.57227384" z3="1.05870273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79138207" y3="-3.53408709" z3="2.63058714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07099697" y3="-1.49845131" z3="1.95557441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53985564" y3="3.96816641" z3="-0.36485553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88829959" y3="3.66129078" z3="-0.49299467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30134797" y3="2.92526563" z3="-1.59872184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.4141793" y3="2.54811864" z3="-2.60339601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.0725549" y3="2.87774956" z3="-2.4682793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18999298" y3="4.48308817" z3="0.53335571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.6108176" y3="3.94126916" z3="0.27382094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69257469" y3="2.47153482" z3="-1.67033194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77403904" y3="1.98319962" z3="-3.46392505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63356771" y3="2.56396702" z3="-3.23801408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.94952542" y3="-5.78304134" z3="2.23808093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.63906095" y3="-6.23985427" z3="0.16390308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.00829334" y3="1.75417725" z3="-2.59877832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44813447" y3="2.81264198" z3="-0.7839152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79346686" y3="0.1970001" z3="-1.84367336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08729587" y3="1.43178597" z3="-1.74500595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99855788" y3="0.13842488" z3="-2.59662157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47329596" y3="1.24469517" z3="-3.25646526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53573825" y3="-0.81345084" z3="-2.65147409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39837579" y3="1.18693676" z3="-3.83675141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58788526" y3="2.54940908" z3="-2.47049274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74799432" y3="2.45883872" z3="-3.20184033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03508855" y3="3.49049259" z3="-2.45074737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10979808" y3="3.33188157" z3="-3.75235086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56367844" y3="3.94972911" z3="-0.28434976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70265688" y3="5.0849126" z3="-0.22214417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88188851" y3="4.07725727" z3="0.2366575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33262504" y3="5.2740319" z3="0.73981864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53959419" y3="3.20574698" z3="0.24184349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34908821" y3="5.34581392" z3="1.13703004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20319539" y3="6.3136563" z3="0.29050913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.4910284" y3="6.4122241" z3="0.75568947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.5353827" y3="7.18022545" z3="0.31875696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86366322" y3="7.36087241" z3="1.15198537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39289014" y3="-3.54344206" z3="-2.99527184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66552537" y3="-4.59304262" z3="-2.80600968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21444675" y3="-3.07874962" z3="-3.57237537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49551265" y3="-3.52655728" z3="-3.63353821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.62476745" y3="-1.36399131" z3="-1.8949432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41135613" y3="-0.68541181" z3="-2.27733714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.22495654" y3="-0.93308748" z3="-0.96418575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80525156" y3="-1.3624121" z3="-2.63182608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.07,-.9382,-.5436;6.784,-1.919,-1.3638;6.2545,-.9692,-1.2399;4.8862,1.4862,-.9624;4.4152,.3189,-.3866;2.7286,2.6592,-1.198;4.0612,2.7225,-.8294;2.3469,4.9605,-.6241;1.8383,3.7668,-1.0789;1.6912,5.8327,-.5399;2.2205,1.4828,-1.6601;3.2421,.3485,.3099;1.8415,.3027,-.5662;.7156,.6593,.331;1.8302,-.9655,-1.3925;1.0809,-2.4877,-1.2924;1.9139,-5.2769,-6.388;1.6588,-4.8811,-5.4008;.9885,-3.8397,-2.8931;1.6564,-3.5074,-5.1911;1.3566,-5.7501,-4.35;1.036,-5.2234,-3.1042;1.3313,-2.9567,-3.9424;1.9011,-2.8084,-5.9947;1.384,-6.8332,-4.4942;.8351,-5.8893,-2.2605;.5937,-3.3387,-1.627;-.4485,-3.8073,-.9293;-.8401,-4.7692,-1.2725;-.5018,-3.6074,.5368;-.6883,-3.3159,3.3173;-.9963,-4.6515,1.3292;-.1023,-2.4151,1.1511;-.1979,-2.2721,2.5325;-1.0826,-4.5094,2.7117;-1.2836,-5.5975,.8612;.2665,-1.5663,.5722;.1224,-1.3304,2.9872;-1.4403,-5.3441,3.3207;-.7509,-3.2066,4.4039;1.3086,-1.6221,-3.8412;1.5109,-1.2861,-2.9225;.3892,3.5594,-1.3314;-2.1467,-2.7678,-1.7177;-2.9837,-3.0236,-.6285;-3.1039,-2.2659,.4095;-3.7774,-.7682,.9773;-5.1778,-.3831,-.1941;-2.467,.5428,1.0582;-4.3559,-1.2449,2.6897;-3.5919,-4.1996,-.5661;-4.3967,-4.5034,.5623;-4.8163,-.1788,-1.2177;-5.7098,.5276,.1341;-5.908,-1.2111,-.2381;-2.0575,.829,.0801;-1.6041,.2311,1.6644;-2.9031,1.4471,1.518;-4.7532,-.3665,3.2296;-5.1495,-2.0118,2.659;-3.508,-1.6491,3.2723;-5.2821,-3.8461,.5938;-3.8227,-4.3999,1.4963;-4.7166,-5.5448,.4238;4.4024,-2.1794,-.0701;4.1816,-3.2225,-.9801;3.4533,-4.3485,-.6152;2.9579,-4.4287,.6812;3.1958,-3.4316,1.6229;3.9121,-2.3053,1.2381;4.5335,-3.1228,-2.0101;3.2408,-5.1399,-1.3348;2.1237,-5.5723,1.0587;2.7914,-3.5341,2.6306;4.071,-1.4985,1.9556;-.5399,3.9682,-.3649;-1.8883,3.6613,-.493;-2.3013,2.9253,-1.5987;-1.4142,2.5481,-2.6034;-.0726,2.8777,-2.4683;-.19,4.4831,.5334;-2.6108,3.9413,.2738;-3.6926,2.4715,-1.6703;-1.774,1.9832,-3.4639;.6336,2.564,-3.238;1.9495,-5.783,2.2381;1.6391,-6.2399,.1639;-4.0083,1.7542,-2.5988;-4.4481,2.8126,-.7839;6.7935,.197,-1.8437;6.0873,1.4318,-1.745;7.9986,.1384,-2.5966;8.4733,1.2447,-3.2565;8.5357,-.8135,-2.6515;9.3984,1.1869,-3.8368;6.5879,2.5494,-2.4705;7.748,2.4588,-3.2018;6.0351,3.4905,-2.4507;8.1098,3.3319,-3.7524;4.5637,3.9497,-.2843;3.7027,5.0849,-.2221;5.8819,4.0773,.2367;6.3326,5.274,.7398;6.5396,3.2057,.2418;7.3491,5.3458,1.137;4.2032,6.3137,.2905;5.491,6.4122,.7557;3.5354,7.1802,.3188;5.8637,7.3609,1.152;-2.3929,-3.5434,-2.9953;-2.6655,-4.593,-2.806;-3.2144,-3.0787,-3.5724;-1.4955,-3.5266,-3.6335;-1.6248,-1.364,-1.8949;-2.4114,-.6854,-2.2773;-1.225,-.9331,-.9642;-.8053,-1.3624,-2.6318;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661775050612</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003049706436 0.000297882361 0.024705273469 0.005336592492</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659071 -0.000695568 0.000047871 0.000146875 0.000177051 0.000229657 0.000292500 0.000373364 0.000403036 0.000491408 0.000629788 0.000724772 0.000756642 0.000757843 0.000829951 0.000888409 0.000941337 0.001109932 0.001174261 0.001199256 0.001244911 0.001339758 0.001407936 0.001427005 0.001471020 0.001735219 0.001816120 0.002016002 0.002135742 0.002674911 0.002980557 0.003092212 0.003249202 0.003558634 0.003893171 0.004177393 0.004305038 0.004369409 0.004783725 0.005345566 0.005560073 0.005886744 0.006103176 0.006536347 0.006765759 0.007258169 0.007537151 0.007873167 0.008170829 0.009225599 0.009335545 0.010107130 0.010276463 0.012420500 0.012747241 0.013221669 0.014229117 0.014584895 0.014889398 0.015273970 0.015734352 0.015855356 0.016120951 0.016396397 0.017311030 0.017957141 0.018373726 0.020281988 0.021024892 0.022189310 0.022996240 0.023194647 0.024498715 0.024913723 0.025948092 0.026462696 0.026721164 0.027760407 0.028863539 0.029683107 0.030412184 0.030995380 0.031838481 0.032667037 0.033665505 0.037027245 0.037686147 0.038336356 0.039090980 0.040065003 0.040756818 0.043125327 0.045258106 0.046123462 0.047090069 0.048088895 0.049669422 0.050666049 0.051321719 0.051556728 0.051799826 0.052281415 0.052386738 0.052539727 0.053793317 0.054709004 0.056491766 0.056836723 0.056958242 0.057203713 0.057572204 0.058382463 0.059197190 0.059486103 0.060239921 0.060471311 0.061436169 0.061678617 0.064546538 0.064601669 0.065526960 0.067695155 0.067960494 0.069196507 0.071585877 0.072647183 0.076354100 0.076912587 0.080004237 0.080945065 0.082078426 0.086284385 0.089450944 0.090799706 0.092574563 0.092837514 0.094161908 0.095114091 0.095286064 0.095862648 0.096359086 0.096852360 0.097705176 0.098148319 0.099242676 0.099433337 0.099980612 0.101230987 0.101955995 0.102644577 0.103666187 0.104209432 0.105018439 0.106504065 0.107314220 0.107846359 0.108670280 0.110120355 0.112551727 0.113338258 0.116024615 0.116459378 0.117144794 0.119413407 0.122725503 0.125536175 0.127577970 0.128181338 0.131093499 0.133027837 0.135107504 0.136685678 0.141958115 0.144327008 0.144813250 0.145699917 0.146687871 0.147481560 0.152479490 0.157233502 0.159716924 0.169704580 0.173846987 0.174625365 0.180357106 0.183144698 0.184698393 0.185298767 0.188024269 0.189492709 0.199902974 0.201752097 0.203273333 0.204620799 0.206772729 0.207126369 0.208875501 0.209515453 0.212239911 0.215090712 0.216463053 0.224677714 0.231447846 0.232375928 0.232965290 0.234902139 0.243968921 0.247997605 0.254233527 0.254982458 0.256667447 0.258669268 0.271367125 0.276161396 0.289386110 0.295184801 0.296985267 0.299146707 0.303760647 0.305846033 0.307519107 0.310665471 0.320010139 0.321769786 0.324623947 0.327585338 0.344194756 0.346205849 0.346673010 0.350413927 0.354644261 0.357934076 0.358904913 0.363820259 0.367718800 0.379844817 0.404314884 0.424727952 0.430016479 0.444297080 0.462401867 0.462984558 0.473282849 0.474628359 0.477886146 0.479420443 0.498018148 0.505579025 0.540758780 0.559687342 0.566698021 0.569434626 0.583211135 0.598402122 0.604134361 0.632973344 0.642772242 0.665254947 0.670024120 0.674447637 0.681279569 0.685070801 0.690716393 0.691589084 0.704240276 0.704733609 0.713446536 0.737027779 0.750678808 0.771569969 0.775823347 0.797854816 0.804083199 0.810643578 0.814510804 0.816128361 0.819384494 0.820139805 0.826148920 0.829325293 0.830453390 0.835037874 0.840487656 0.842061107 0.844582667 0.848591209 0.856390195 0.859235615 0.867332042 0.871635455 0.874886861 0.886482020 0.887695446 0.893543066 0.914727439 0.923898262 0.930840693 0.933610684 0.958344118 0.969106925 0.975819502 0.989116151 0.999612137 1.012914654 1.034005278 1.042602311 1.049150682 1.055207999 1.072719790 1.084180855 1.088639679 1.109989506 1.110584462 1.116089759 1.122411206 1.123318271 1.133999251 1.142159380 1.161138194 1.168703602 1.172568673 1.173185994 1.200369352 1.203625950 1.214297876 1.236754487 1.247528996 1.291699505 1.295693369 1.314022803 1.326037429 1.326393159 1.330133765 1.332485270 1.334418212 1.340914308 1.345755356 1.362010136 1.377186173 1.378844873 1.380938192 1.381559419 1.557326426 1.661593816 1.671870911</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">9</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06843383" y3="-0.93854928" z3="-0.54559996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78279072" y3="-1.9190405" z3="-1.36539931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25336639" y3="-0.96927031" z3="-1.24129345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88521487" y3="1.48612274" z3="-0.96289742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41360047" y3="0.3185439" z3="-0.38824877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72817605" y3="2.66018734" z3="-1.1978789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06078111" y3="2.72258824" z3="-0.82891691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34720852" y3="4.96086253" z3="-0.62087934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83832681" y3="3.76797165" z3="-1.07729778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69173083" y3="5.83317216" z3="-0.5354831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21983535" y3="1.48459604" z3="-1.66179544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.24014281" y3="0.34774561" z3="0.30764416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.8400027" y3="0.30336018" z3="-0.56936598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71359294" y3="0.6595995" z3="0.32743669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82890414" y3="-0.96420955" z3="-1.39657276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0805937" y3="-2.48767615" z3="-1.29382942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.90531343" y3="-5.278713" z3="-6.38981104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.65190469" y3="-4.88259146" z3="-5.40228386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98606561" y3="-3.84048355" z3="-2.89373772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.64888196" y3="-3.50881356" z3="-5.19325484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35257591" y3="-5.75131576" z3="-4.3504626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03420043" y3="-5.22424079" z3="-3.10423856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32601101" y3="-2.95768714" z3="-3.94415954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.89141271" y3="-2.81001187" z3="-5.99766763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.38049188" y3="-6.83441892" z3="-4.49418431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83547235" y3="-5.88987437" z3="-2.25983456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59335925" y3="-3.33913406" z3="-1.62712539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44731064" y3="-3.80808458" z3="-0.92725054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.83844152" y3="-4.77074739" z3="-1.26881872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.49798716" y3="-3.6069147" z3="0.53878783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.67723519" y3="-3.31415939" z3="3.31967038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.98840948" y3="-4.65149614" z3="1.33322114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09933738" y3="-2.41336025" z3="1.15124056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19109095" y3="-2.26986526" z3="2.53286171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.07123288" y3="-4.50867864" z3="2.71582363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.27498741" y3="-5.59836733" z3="0.86672073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26598606" y3="-1.56405284" z3="0.57094503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12896758" y3="-1.32740283" z3="2.98604223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.42574959" y3="-5.34355372" z3="3.32634396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.7370417" y3="-3.20426942" z3="4.40637961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3023706" y3="-1.62310948" z3="-3.84359747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50628368" y3="-1.28632239" z3="-2.92546518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38905013" y3="3.56184534" z3="-1.32992469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14765159" y3="-2.77162075" z3="-1.71375378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98238451" y3="-3.0275569" z3="-0.62298295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1037399" y3="-2.26820734" z3="0.41391416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.77902359" y3="-0.76638099" z3="0.9697384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.17071595" y3="-0.3847778" z3="-0.21200751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.46727222" y3="0.54307907" z3="1.05849961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.37046384" y3="-1.23535833" z3="2.67973812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.58732785" y3="-4.20501777" z3="-0.5578429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.39025526" y3="-4.50933808" z3="0.57179716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.80297859" y3="-0.18527398" z3="-1.23370559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.70327458" y3="0.52749836" z3="0.10940796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.90143185" y3="-1.21223819" z3="-0.25707678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.03487155" y3="0.82118019" z3="0.08369638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.61516" y3="0.23200818" z3="1.68863689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91430235" y3="1.45270074" z3="1.50389934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.77007203" y3="-0.3546557" z3="3.21360408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.16438385" y3="-2.00154928" z3="2.64659887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.52781001" y3="-1.6383469" z3="3.26979076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.27728528" y3="-3.8544519" z3="0.60317944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.81568944" y3="-4.40300485" z3="1.50502185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.70737262" y3="-5.55182605" z3="0.43500699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.40108134" y3="-2.1799596" z3="-0.07258322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18021125" y3="-3.22270249" z3="-0.98294988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4532727" y3="-4.34960983" z3="-0.61799459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.95938673" y3="-4.4309907" z3="0.67888555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19715982" y3="-3.43411572" z3="1.62088782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91191332" y3="-2.30691253" z3="1.23591277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.53127212" y3="-3.12219907" z3="-2.01318573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24077469" y3="-5.14082999" z3="-1.33779366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.1270057" y3="-5.5757478" z3="1.05673511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79383664" y3="-3.53755689" z3="2.62891472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.0707027" y3="-1.50021882" z3="1.95362897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53933224" y3="3.96915641" z3="-0.36217274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88809105" y3="3.6639846" z3="-0.49079453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30216136" y3="2.931391" z3="-1.59834528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41563898" y3="2.5559591" z3="-2.60426771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07352933" y3="2.88341256" z3="-2.4683324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18878039" y3="4.48158071" z3="0.53717114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.61027961" y3="3.94317178" z3="0.27659618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69411627" y3="2.48027598" z3="-1.6710816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77643816" y3="1.99416857" z3="-3.46645424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63221066" y3="2.57073543" z3="-3.2388835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.9558995" y3="-5.78844631" z3="2.23620606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.64065103" y3="-6.24234844" z3="0.16211755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.0129444" y3="1.77144664" z3="-2.60542864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44728123" y3="2.81541854" z3="-0.77966535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79281688" y3="0.19723786" z3="-1.84399617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08677652" y3="1.4320523" z3="-1.74488446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99845862" y3="0.13904193" z3="-2.59609002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47387708" y3="1.24575195" z3="-3.2547037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53555523" y3="-0.81286495" z3="-2.65122461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39942527" y3="1.18831792" z3="-3.83427443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58803957" y3="2.55013626" z3="-2.46920261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74869355" y3="2.4599545" z3="-3.19972942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03536282" y3="3.49128534" z3="-2.44915208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11105533" y3="3.33336647" z3="-3.74928718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56362373" y3="3.94900293" z3="-0.28235126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70302065" y3="5.08441831" z3="-0.21882067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88184961" y3="4.07551008" z3="0.2388805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.3329903" y3="5.27158357" z3="0.74334769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53928661" y3="3.20380005" z3="0.24314577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.34948387" y3="5.34257597" z3="1.14062015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20393101" y3="6.31242341" z3="0.29522327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.4918005" y3="6.41005965" z3="0.76047747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53637356" y3="7.17915802" z3="0.32443954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86476548" y3="7.35815087" z3="1.157793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39500457" y3="-3.5486285" z3="-2.99025921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66531088" y3="-4.59860171" z3="-2.79981904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21863858" y3="-3.08570037" z3="-3.56585691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49900688" y3="-3.53043726" z3="-3.63040377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.62744122" y3="-1.36752842" z3="-1.89341325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41497581" y3="-0.69033241" z3="-2.27631827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.22733652" y3="-0.93512474" z3="-0.96356193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80835136" y3="-1.36604802" z3="-2.63074349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0684,-.9385,-.5456;6.7828,-1.919,-1.3654;6.2534,-.9693,-1.2413;4.8852,1.4861,-.9629;4.4136,.3185,-.3882;2.7282,2.6602,-1.1979;4.0608,2.7226,-.8289;2.3472,4.9609,-.6209;1.8383,3.768,-1.0773;1.6917,5.8332,-.5355;2.2198,1.4846,-1.6618;3.2401,.3477,.3076;1.84,.3034,-.5694;.7136,.6596,.3274;1.8289,-.9642,-1.3966;1.0806,-2.4877,-1.2938;1.9053,-5.2787,-6.3898;1.6519,-4.8826,-5.4023;.9861,-3.8405,-2.8937;1.6489,-3.5088,-5.1933;1.3526,-5.7513,-4.3505;1.0342,-5.2242,-3.1042;1.326,-2.9577,-3.9442;1.8914,-2.81,-5.9977;1.3805,-6.8344,-4.4942;.8355,-5.8899,-2.2598;.5934,-3.3391,-1.6271;-.4473,-3.8081,-.9273;-.8384,-4.7707,-1.2688;-.498,-3.6069,.5388;-.6772,-3.3142,3.3197;-.9884,-4.6515,1.3332;-.0993,-2.4134,1.1512;-.1911,-2.2699,2.5329;-1.0712,-4.5087,2.7158;-1.275,-5.5984,.8667;.266,-1.5641,.5709;.129,-1.3274,2.986;-1.4257,-5.3436,3.3263;-.737,-3.2043,4.4064;1.3024,-1.6231,-3.8436;1.5063,-1.2863,-2.9255;.3891,3.5618,-1.3299;-2.1477,-2.7716,-1.7138;-2.9824,-3.0276,-.623;-3.1037,-2.2682,.4139;-3.779,-.7664,.9697;-5.1707,-.3848,-.212;-2.4673,.5431,1.0585;-4.3705,-1.2354,2.6797;-3.5873,-4.205,-.5578;-4.3903,-4.5093,.5718;-4.803,-.1853,-1.2337;-5.7033,.5275,.1094;-5.9014,-1.2122,-.2571;-2.0349,.8212,.0837;-1.6152,.232,1.6886;-2.9143,1.4527,1.5039;-4.7701,-.3547,3.2136;-5.1644,-2.0015,2.6466;-3.5278,-1.6383,3.2698;-5.2773,-3.8545,.6032;-3.8157,-4.403,1.505;-4.7074,-5.5518,.435;4.4011,-2.18,-.0726;4.1802,-3.2227,-.9829;3.4533,-4.3496,-.618;2.9594,-4.431,.6789;3.1972,-3.4341,1.6209;3.9119,-2.3069,1.2359;4.5313,-3.1222,-2.0132;3.2408,-5.1408,-1.3378;2.127,-5.5757,1.0567;2.7938,-3.5376,2.6289;4.0707,-1.5002,1.9536;-.5393,3.9692,-.3622;-1.8881,3.664,-.4908;-2.3022,2.9314,-1.5983;-1.4156,2.556,-2.6043;-.0735,2.8834,-2.4683;-.1888,4.4816,.5372;-2.6103,3.9432,.2766;-3.6941,2.4803,-1.6711;-1.7764,1.9942,-3.4665;.6322,2.5707,-3.2389;1.9559,-5.7884,2.2362;1.6407,-6.2423,.1621;-4.0129,1.7714,-2.6054;-4.4473,2.8154,-.7797;6.7928,.1972,-1.844;6.0868,1.4321,-1.7449;7.9985,.139,-2.5961;8.4739,1.2458,-3.2547;8.5356,-.8129,-2.6512;9.3994,1.1883,-3.8343;6.588,2.5501,-2.4692;7.7487,2.46,-3.1997;6.0354,3.4913,-2.4492;8.1111,3.3334,-3.7493;4.5636,3.949,-.2824;3.703,5.0844,-.2188;5.8818,4.0755,.2389;6.333,5.2716,.7433;6.5393,3.2038,.2431;7.3495,5.3426,1.1406;4.2039,6.3124,.2952;5.4918,6.4101,.7605;3.5364,7.1792,.3244;5.8648,7.3582,1.1578;-2.395,-3.5486,-2.9903;-2.6653,-4.5986,-2.7998;-3.2186,-3.0857,-3.5659;-1.499,-3.5304,-3.6304;-1.6274,-1.3675,-1.8934;-2.415,-.6903,-2.2763;-1.2273,-.9351,-.9636;-.8084,-1.366,-2.6307;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661790490190</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002158722660 0.000240187197 0.033110437333 0.005340509527</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659110 -0.000436485 0.000048173 0.000146881 0.000177212 0.000229717 0.000293069 0.000373354 0.000403155 0.000491804 0.000630086 0.000727687 0.000756816 0.000757654 0.000829948 0.000890614 0.000941343 0.001113970 0.001174226 0.001200152 0.001247212 0.001347186 0.001407878 0.001426632 0.001471398 0.001735168 0.001816851 0.002023840 0.002135130 0.002783044 0.002984557 0.003107547 0.003302188 0.003598677 0.003904215 0.004177594 0.004304531 0.004397456 0.004785040 0.005433369 0.005560091 0.005894409 0.006103961 0.006537378 0.006771253 0.007258145 0.007539486 0.007874499 0.008171216 0.009226252 0.009335553 0.010107442 0.010276875 0.012421038 0.012747249 0.013221794 0.014229642 0.014584888 0.014889638 0.015274345 0.015738775 0.015862050 0.016121040 0.016396379 0.017311022 0.017960804 0.018374054 0.020282326 0.021025794 0.022189795 0.022996238 0.023194844 0.024498861 0.024918008 0.025948091 0.026462679 0.026721184 0.027760454 0.028888634 0.029684293 0.030412186 0.030995399 0.031838421 0.032667057 0.033666664 0.037039254 0.037689970 0.038336000 0.039092036 0.040064929 0.040756993 0.043125251 0.045258142 0.046123443 0.047094422 0.048107766 0.049669421 0.050666122 0.051321720 0.051556730 0.051799827 0.052281415 0.052386738 0.052539724 0.053793307 0.054709001 0.056491765 0.056836724 0.056958236 0.057203740 0.057572200 0.058382694 0.059197191 0.059486046 0.060240133 0.060471571 0.061436158 0.061678616 0.064546538 0.064601686 0.065526958 0.067695129 0.067960579 0.069196508 0.071585876 0.072647184 0.076354110 0.076912609 0.080004856 0.080945963 0.082078425 0.086284399 0.089450945 0.090799704 0.092574571 0.092837521 0.094162054 0.095114161 0.095286140 0.095862645 0.096359180 0.096852379 0.097705791 0.098149943 0.099249662 0.099433425 0.099980891 0.101231011 0.101956007 0.102644634 0.103666151 0.104209268 0.105018942 0.106504058 0.107314230 0.107846298 0.108670347 0.110120386 0.112551741 0.113338531 0.116025881 0.116459499 0.117144820 0.119414020 0.122725806 0.125536535 0.127578577 0.128181372 0.131102404 0.133027905 0.135108234 0.136685721 0.141958131 0.144351102 0.144963726 0.145700234 0.146688776 0.147482020 0.152479614 0.157233539 0.159717451 0.169704579 0.173847400 0.174625540 0.180357194 0.183145538 0.184752677 0.185309229 0.188025128 0.189514738 0.199975062 0.201754325 0.203273377 0.204621611 0.206772767 0.207126378 0.208875502 0.209515588 0.212240019 0.215090722 0.216464017 0.224677742 0.231447846 0.232375930 0.232965302 0.234902199 0.243968948 0.247997599 0.254233584 0.254982456 0.256667447 0.258669285 0.271367127 0.276161454 0.289386106 0.295184806 0.296985266 0.299147311 0.303761046 0.305846079 0.307519107 0.310665466 0.320010258 0.321769782 0.324623977 0.327585413 0.344194786 0.346227187 0.346701649 0.350414601 0.354644262 0.357934145 0.358908234 0.363820869 0.368524901 0.379857576 0.404318628 0.424735996 0.430016478 0.444297297 0.462404948 0.462984596 0.473295146 0.474635816 0.477886156 0.479423626 0.498018218 0.505583516 0.540762496 0.559698581 0.566698092 0.569437740 0.583212160 0.598699938 0.604134378 0.632988463 0.642773446 0.665254952 0.670025775 0.674504442 0.681281017 0.685688317 0.690806934 0.691593484 0.704240291 0.704733820 0.713448565 0.737027815 0.750678810 0.771569986 0.775823369 0.797854939 0.804085314 0.810664887 0.814576273 0.816154217 0.819403475 0.820144997 0.826347871 0.829326924 0.830453525 0.835043823 0.840487781 0.842099933 0.844583500 0.848591295 0.856391786 0.859236939 0.867332054 0.871635906 0.874887240 0.886482447 0.887695450 0.893543109 0.914727558 0.923898262 0.930840990 0.933610892 0.958344122 0.969106982 0.975819505 0.989116174 0.999612137 1.012914927 1.034005295 1.042602436 1.049150689 1.055208050 1.072721103 1.084180867 1.088639686 1.109989507 1.110584462 1.116089871 1.122411206 1.123318271 1.133999283 1.142159537 1.161138238 1.168703604 1.172568691 1.173186000 1.200369373 1.203626162 1.214299994 1.236865188 1.247533665 1.291699510 1.295693384 1.314022974 1.326037704 1.326393343 1.330133768 1.332498496 1.334418255 1.340914308 1.345755363 1.362010154 1.377186185 1.378844874 1.380938190 1.381559424 1.557326581 1.661596352 1.671870907</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">10</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06710233" y3="-0.93888029" z3="-0.54783553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78157607" y3="-1.91924646" z3="-1.36753024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25231446" y3="-0.96943271" z3="-1.24307508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8848375" y3="1.48613799" z3="-0.96334652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41250615" y3="0.31823362" z3="-0.38994266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72851303" y3="2.6614501" z3="-1.19802619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06097895" y3="2.72286393" z3="-0.82844316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34819236" y3="4.96139331" z3="-0.61774631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83893241" y3="3.76927142" z3="-1.07578738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.6929401" y3="5.83374954" z3="-0.53108505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.22013975" y3="1.48662572" z3="-1.6639375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.23856097" y3="0.34715965" z3="0.30514248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83917055" y3="0.30430631" z3="-0.57313309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71226943" y3="0.66038736" z3="0.32313103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82818316" y3="-0.96257275" z3="-1.40134375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08036623" y3="-2.48649714" z3="-1.29566406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.89787593" y3="-5.28002028" z3="-6.39148118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.64597349" y3="-4.88347484" z3="-5.40374841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98397749" y3="-3.84029349" z3="-2.89462429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.64216524" y3="-3.50956854" z3="-5.19560341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34932881" y3="-5.75176425" z3="-4.3508122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03287092" y3="-5.22415035" z3="-3.10434079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32113079" y3="-2.95791453" z3="-3.946283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.88259633" y3="-2.81106317" z3="-6.00089612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37784256" y3="-6.83493703" z3="-4.49388523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83623108" y3="-5.88942449" z3="-2.25916526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59316804" y3="-3.33848821" z3="-1.62761555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44596485" y3="-3.80793279" z3="-0.92565494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.83637452" y3="-4.77141642" z3="-1.26565338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.49391433" y3="-3.60607137" z3="0.54042378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.66635635" y3="-3.31290813" z3="3.32165447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.97967333" y3="-4.65160523" z3="1.33645033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09692808" y3="-2.41119075" z3="1.15137192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18527722" y3="-2.26748343" z3="2.53317904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.05899693" y3="-4.50861304" z3="2.7192609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.26501705" y3="-5.59939196" z3="0.87104961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26444926" y3="-1.56102048" z3="0.5698312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13353356" y3="-1.32401395" z3="2.98517248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.40959149" y3="-5.34427239" z3="3.33096596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.72322481" y3="-3.20294679" z3="4.40851578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.29637289" y3="-1.62328559" z3="-3.84659031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50201553" y3="-1.28572282" z3="-2.92912051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38944241" y3="3.56385666" z3="-1.32784032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14833017" y3="-2.77481662" z3="-1.7099831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.98048433" y3="-3.02964404" z3="-0.61682402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10094568" y3="-2.26813958" z3="0.41883981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.7818785" y3="-0.76506733" z3="0.9649267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.16288762" y3="-0.38898242" z3="-0.23199839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.47102413" y3="0.544788" z3="1.05881435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.38957584" y3="-1.22629982" z3="2.67126666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.58345192" y3="-4.2078156" z3="-0.54823955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.38406041" y3="-4.51111326" z3="0.58335593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.78514345" y3="-0.19889719" z3="-1.25257199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.69689604" y3="0.52784757" z3="0.07629752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.89474772" y3="-1.21542665" z3="-0.27692928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.04059854" y3="0.82050535" z3="0.08560795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.62083039" y3="0.23641069" z3="1.68706544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91698271" y3="1.45487251" z3="1.50067842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.79441196" y3="-0.34220825" z3="3.19613692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.18363122" y3="-1.99222547" z3="2.63435228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.55273006" y3="-1.62591149" z3="3.27229995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.2723293" y3="-3.85791287" z3="0.61442811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.80829799" y3="-4.40142178" z3="1.51548091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.69929077" y3="-5.55456968" z3="0.44943678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.39983337" y3="-2.1805192" z3="-0.0752655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17892723" y3="-3.22297057" z3="-0.98595373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45347571" y3="-4.35077561" z3="-0.62079824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96120059" y3="-4.43338102" z3="0.67661565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19859926" y3="-3.43654562" z3="1.6187418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91169638" y3="-2.30836624" z3="1.23352893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52904174" y3="-3.12169266" z3="-2.01643199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24114159" y3="-5.14192049" z3="-1.34073107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.13125274" y3="-5.57967433" z3="1.05508926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79643398" y3="-3.54090267" z3="2.62713727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07033152" y3="-1.50181125" z3="1.95144203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53807182" y3="3.96982548" z3="-0.3586616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88703044" y3="3.66529169" z3="-0.48663213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30223389" y3="2.93477248" z3="-1.5950837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41656257" y3="2.56050818" z3="-2.60217466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07423669" y3="2.88730814" z3="-2.4668607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18662505" y3="4.48076041" z3="0.54115411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.60846742" y3="3.94354806" z3="0.28181766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69455175" y3="2.48481805" z3="-1.66801213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.77823274" y3="2.00008743" z3="-3.46482903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.63074406" y3="2.57565976" z3="-3.2385193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.96299299" y3="-5.79382588" z3="2.23468151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.64400316" y3="-6.24612031" z3="0.16088492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.0144012" y3="1.77916628" z3="-2.60365986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44698433" y3="2.81775344" z3="-0.77542808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79232762" y3="0.19735098" z3="-1.84474398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08666545" y3="1.43230724" z3="-1.74488076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99822638" y3="0.13942097" z3="-2.59644032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47419808" y3="1.24653792" z3="-3.25397275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53507699" y3="-0.8125892" z3="-2.65215162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39993421" y3="1.18930934" z3="-3.8332554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58850576" y3="2.55085587" z3="-2.46806874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.7493709" y3="2.46092396" z3="-3.19827029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03607941" y3="3.4921413" z3="-2.4474047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11217645" y3="3.33467483" z3="-3.7469921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56418532" y3="3.94835672" z3="-0.28017212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70401053" y3="5.08402122" z3="-0.21544001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88233437" y3="4.07369494" z3="0.24154207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33383311" y3="5.2689792" z3="0.74755732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53943294" y3="3.20172664" z3="0.24488779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35026637" y3="5.33908908" z3="1.14514272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20528888" y3="6.31120994" z3="0.30020427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.49309427" y3="6.40777304" z3="0.76585989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53806726" y3="7.17817145" z3="0.33032876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86635639" y3="7.35523846" z3="1.16439169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39779509" y3="-3.55442106" z3="-2.98461705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66685541" y3="-4.60429125" z3="-2.791686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22298151" y3="-3.09321779" z3="-3.55938361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50315867" y3="-3.53676942" z3="-3.62671621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63001873" y3="-1.37048153" z3="-1.89361368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41873763" y3="-0.69509007" z3="-2.27715546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.22926861" y3="-0.93528881" z3="-0.96532246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81193822" y3="-1.36976503" z3="-2.63209691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0671,-.9389,-.5478;6.7816,-1.9192,-1.3675;6.2523,-.9694,-1.2431;4.8848,1.4861,-.9633;4.4125,.3182,-.3899;2.7285,2.6615,-1.198;4.061,2.7229,-.8284;2.3482,4.9614,-.6177;1.8389,3.7693,-1.0758;1.6929,5.8337,-.5311;2.2201,1.4866,-1.6639;3.2386,.3472,.3051;1.8392,.3043,-.5731;.7123,.6604,.3231;1.8282,-.9626,-1.4013;1.0804,-2.4865,-1.2957;1.8979,-5.28,-6.3915;1.646,-4.8835,-5.4037;.984,-3.8403,-2.8946;1.6422,-3.5096,-5.1956;1.3493,-5.7518,-4.3508;1.0329,-5.2242,-3.1043;1.3211,-2.9579,-3.9463;1.8826,-2.8111,-6.0009;1.3778,-6.8349,-4.4939;.8362,-5.8894,-2.2592;.5932,-3.3385,-1.6276;-.446,-3.8079,-.9257;-.8364,-4.7714,-1.2657;-.4939,-3.6061,.5404;-.6664,-3.3129,3.3217;-.9797,-4.6516,1.3365;-.0969,-2.4112,1.1514;-.1853,-2.2675,2.5332;-1.059,-4.5086,2.7193;-1.265,-5.5994,.871;.2644,-1.561,.5698;.1335,-1.324,2.9852;-1.4096,-5.3443,3.331;-.7232,-3.2029,4.4085;1.2964,-1.6233,-3.8466;1.502,-1.2857,-2.9291;.3894,3.5639,-1.3278;-2.1483,-2.7748,-1.71;-2.9805,-3.0296,-.6168;-3.1009,-2.2681,.4188;-3.7819,-.7651,.9649;-5.1629,-.389,-.232;-2.471,.5448,1.0588;-4.3896,-1.2263,2.6713;-3.5835,-4.2078,-.5482;-4.3841,-4.5111,.5834;-4.7851,-.1989,-1.2526;-5.6969,.5278,.0763;-5.8947,-1.2154,-.2769;-2.0406,.8205,.0856;-1.6208,.2364,1.6871;-2.917,1.4549,1.5007;-4.7944,-.3422,3.1961;-5.1836,-1.9922,2.6344;-3.5527,-1.6259,3.2723;-5.2723,-3.8579,.6144;-3.8083,-4.4014,1.5155;-4.6993,-5.5546,.4494;4.3998,-2.1805,-.0753;4.1789,-3.223,-.986;3.4535,-4.3508,-.6208;2.9612,-4.4334,.6766;3.1986,-3.4365,1.6187;3.9117,-2.3084,1.2335;4.529,-3.1217,-2.0164;3.2411,-5.1419,-1.3407;2.1313,-5.5797,1.0551;2.7964,-3.5409,2.6271;4.0703,-1.5018,1.9514;-.5381,3.9698,-.3587;-1.887,3.6653,-.4866;-2.3022,2.9348,-1.5951;-1.4166,2.5605,-2.6022;-.0742,2.8873,-2.4669;-.1866,4.4808,.5412;-2.6085,3.9435,.2818;-3.6946,2.4848,-1.668;-1.7782,2.0001,-3.4648;.6307,2.5757,-3.2385;1.963,-5.7938,2.2347;1.644,-6.2461,.1609;-4.0144,1.7792,-2.6037;-4.447,2.8178,-.7754;6.7923,.1974,-1.8447;6.0867,1.4323,-1.7449;7.9982,.1394,-2.5964;8.4742,1.2465,-3.254;8.5351,-.8126,-2.6522;9.3999,1.1893,-3.8333;6.5885,2.5509,-2.4681;7.7494,2.4609,-3.1983;6.0361,3.4921,-2.4474;8.1122,3.3347,-3.747;4.5642,3.9484,-.2802;3.704,5.084,-.2154;5.8823,4.0737,.2415;6.3338,5.269,.7476;6.5394,3.2017,.2449;7.3503,5.3391,1.1451;4.2053,6.3112,.3002;5.4931,6.4078,.7659;3.5381,7.1782,.3303;5.8664,7.3552,1.1644;-2.3978,-3.5544,-2.9846;-2.6669,-4.6043,-2.7917;-3.223,-3.0932,-3.5594;-1.5032,-3.5368,-3.6267;-1.63,-1.3705,-1.8936;-2.4187,-.6951,-2.2772;-1.2293,-.9353,-.9653;-.8119,-1.3698,-2.6321;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661805234829</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001449109392 0.000156885376 0.026925673467 0.005335283136</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659157 -0.000335914 0.000048760 0.000149509 0.000177334 0.000234194 0.000293991 0.000374904 0.000403355 0.000492382 0.000631284 0.000740755 0.000756456 0.000762273 0.000830281 0.000896688 0.000941428 0.001113857 0.001174608 0.001201673 0.001247071 0.001355112 0.001408852 0.001426555 0.001471692 0.001735069 0.001819805 0.002028107 0.002134570 0.002800061 0.002987286 0.003112931 0.003336380 0.003633340 0.003913782 0.004177446 0.004304215 0.004448906 0.004784918 0.005518462 0.005560068 0.005899180 0.006104039 0.006541205 0.006781446 0.007258133 0.007539233 0.007875817 0.008171425 0.009226536 0.009335730 0.010107759 0.010277198 0.012421531 0.012747245 0.013222011 0.014229964 0.014584991 0.014889610 0.015274606 0.015746162 0.015872126 0.016121572 0.016396392 0.017311246 0.017964282 0.018375438 0.020282532 0.021027170 0.022189712 0.022996263 0.023194937 0.024498915 0.024920887 0.025948091 0.026462664 0.026721184 0.027760509 0.028921353 0.029686058 0.030412206 0.030996101 0.031838539 0.032667085 0.033669512 0.037046535 0.037691208 0.038335595 0.039091995 0.040065606 0.040756927 0.043126071 0.045258197 0.046123444 0.047100439 0.048140426 0.049669424 0.050666146 0.051321734 0.051556738 0.051799830 0.052281415 0.052386738 0.052539728 0.053793305 0.054709031 0.056491765 0.056836724 0.056958250 0.057203795 0.057572321 0.058383273 0.059197250 0.059486798 0.060240785 0.060471644 0.061436154 0.061678698 0.064546593 0.064601823 0.065526967 0.067695120 0.067961256 0.069197003 0.071585879 0.072647183 0.076354113 0.076912605 0.080004811 0.080946245 0.082078425 0.086284398 0.089450948 0.090799756 0.092574561 0.092837539 0.094162330 0.095114221 0.095286164 0.095862779 0.096359185 0.096852373 0.097707391 0.098157765 0.099261963 0.099433455 0.099984922 0.101231157 0.101956023 0.102644845 0.103668711 0.104212927 0.105023918 0.106504088 0.107314919 0.107848381 0.108670719 0.110120394 0.112551753 0.113338785 0.116026010 0.116459547 0.117144911 0.119414054 0.122725994 0.125537096 0.127579021 0.128181366 0.131110632 0.133028102 0.135108754 0.136685992 0.141958148 0.144357474 0.145021525 0.145700270 0.146688878 0.147482638 0.152479672 0.157233610 0.159717641 0.169704591 0.173847357 0.174625630 0.180357187 0.183145754 0.184757920 0.185309896 0.188025101 0.189516967 0.199976255 0.201754612 0.203273446 0.204621828 0.206772771 0.207126380 0.208875501 0.209515582 0.212240076 0.215090735 0.216464223 0.224677771 0.231447843 0.232375939 0.232965307 0.234902239 0.243969015 0.247997712 0.254233663 0.254982485 0.256667453 0.258669360 0.271367125 0.276161490 0.289386230 0.295184812 0.296988359 0.299147338 0.303761094 0.305846117 0.307519118 0.310666851 0.320010273 0.321769814 0.324624235 0.327585435 0.344195245 0.346243821 0.346731655 0.350414918 0.354644325 0.357934898 0.358911805 0.363821145 0.368947146 0.379863058 0.404320204 0.424736418 0.430016485 0.444297314 0.462405817 0.462984643 0.473299534 0.474636850 0.477886151 0.479425795 0.498018220 0.505585262 0.540763700 0.559703677 0.566698130 0.569439016 0.583212417 0.598743328 0.604134406 0.632988800 0.642773915 0.665254979 0.670026330 0.674522616 0.681281640 0.685931988 0.690847986 0.691595811 0.704240297 0.704734131 0.713449472 0.737027824 0.750678812 0.771569991 0.775823378 0.797854932 0.804086098 0.810666618 0.814606443 0.816168018 0.819418886 0.820151008 0.826596923 0.829327058 0.830453573 0.835113419 0.840487790 0.842115519 0.844584765 0.848591585 0.856393082 0.859237256 0.867332060 0.871636045 0.874887642 0.886483048 0.887695461 0.893543112 0.914727546 0.923898262 0.930841223 0.933611014 0.958344122 0.969107077 0.975819508 0.989116169 0.999612138 1.012914932 1.034005307 1.042602483 1.049150691 1.055208066 1.072721130 1.084180869 1.088639686 1.109989508 1.110584463 1.116089881 1.122411206 1.123318271 1.133999284 1.142159602 1.161138250 1.168703623 1.172568694 1.173186017 1.200369417 1.203626425 1.214301123 1.236909047 1.247536438 1.291699532 1.295693390 1.314023025 1.326037800 1.326393403 1.330133773 1.332503109 1.334418327 1.340914350 1.345755472 1.362010204 1.377186244 1.378844881 1.380938192 1.381559422 1.557326656 1.661603787 1.671871183</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">11</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06563625" y3="-0.93910437" z3="-0.5501646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.78022811" y3="-1.91946235" z3="-1.3696257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.25110005" y3="-0.96959727" z3="-1.24498896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88420154" y3="1.48614145" z3="-0.96432454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.41114541" y3="0.31799608" z3="-0.39195775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72844731" y3="2.66241518" z3="-1.19847889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06084825" y3="2.72308413" z3="-0.82858615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34841091" y3="4.96152197" z3="-0.61478964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8389278" y3="3.77004602" z3="-1.07427686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.6932131" y3="5.83377646" z3="-0.52668844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.22009227" y3="1.48830599" z3="-1.66627324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.23675228" y3="0.34666559" z3="0.30242568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83784309" y3="0.30520346" z3="-0.57679384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.71037816" y3="0.66127976" z3="0.31883108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82685747" y3="-0.96115407" z3="-1.40581074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08032383" y3="-2.48565271" z3="-1.29745824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.89194688" y3="-5.28177797" z3="-6.39285668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.64129634" y3="-4.88477366" z3="-5.40498657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98246114" y3="-3.84045785" z3="-2.89548586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.63646087" y3="-3.51072104" z3="-5.19782228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34727837" y3="-5.75260606" z3="-4.35092354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03237899" y3="-5.22441839" z3="-3.10430103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31696709" y3="-2.9585029" z3="-3.94834877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.87485538" y3="-2.81255277" z3="-6.00402071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37662924" y3="-6.83585556" z3="-4.49326101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83777974" y3="-5.88928037" z3="-2.25831438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59320646" y3="-3.33817808" z3="-1.6281701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44452316" y3="-3.8080525" z3="-0.9243305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.83422644" y3="-4.77236167" z3="-1.2628709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.49009212" y3="-3.60533725" z3="0.54178322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.65766393" y3="-3.31073075" z3="3.32316917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.97191403" y3="-4.65144988" z3="1.33943618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09455004" y3="-2.40919767" z3="1.15115373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18046031" y3="-2.26478975" z3="2.53304396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.04872537" y3="-4.50774638" z3="2.72233896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.25592117" y3="-5.60024038" z3="0.87526119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26362443" y3="-1.55853338" z3="0.56837716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13721225" y3="-1.32033215" z3="2.98377498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.39610264" y3="-5.34384251" z3="3.33527193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.71266816" y3="-3.20014933" z3="4.4100718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.29099865" y3="-1.62381721" z3="-3.84955507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49811775" y3="-1.28543633" z3="-2.93271586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38924482" y3="3.56500616" z3="-1.32554979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14871608" y3="-2.77824577" z3="-1.70669971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97886576" y3="-3.03225975" z3="-0.61179068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09971037" y3="-2.26840445" z3="0.42215051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78423462" y3="-0.76268978" z3="0.95703723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.15484623" y3="-0.38959214" z3="-0.2515919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.47126535" y3="0.5446862" z3="1.06337702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.4074353" y3="-1.2182091" z3="2.65959123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.57942355" y3="-4.21134748" z3="-0.53944431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.37793641" y3="-4.51306945" z3="0.59412086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.77031601" y3="-0.20458653" z3="-1.26973596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.68802823" y3="0.52910247" z3="0.04937185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.88812962" y3="-1.21475457" z3="-0.29774738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.01860119" y3="0.81866166" z3="0.0967315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.63357844" y3="0.23359184" z3="1.71153134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.92299745" y3="1.45603148" z3="1.497481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.81629461" y3="-0.33272832" z3="3.1781976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.20141828" y3="-1.98406651" z3="2.61846345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.57630246" y3="-1.61601388" z3="3.26919738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.26719663" y3="-3.86119003" z3="0.62477854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.80098862" y3="-4.39991969" z3="1.52509029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.69162146" y3="-5.55737569" z3="0.46334744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3985719" y3="-2.18090404" z3="-0.07778199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17779231" y3="-3.22328353" z3="-0.98856978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45370354" y3="-4.35184114" z3="-0.6230594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96278474" y3="-4.43529735" z3="0.67480641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19982123" y3="-3.43836525" z3="1.61691313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91137433" y3="-2.30934414" z3="1.23130149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52712682" y3="-3.12149264" z3="-2.01925912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24158799" y3="-5.14305863" z3="-1.34297484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.13475768" y3="-5.58274356" z3="1.05382559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79865233" y3="-3.54336313" z3="2.62564083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06980213" y3="-1.50274632" z3="1.94921891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53736871" y3="3.96928149" z3="-0.35478902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88653664" y3="3.66551439" z3="-0.48232199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3029818" y3="2.93770827" z3="-1.59213604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41816978" y3="2.56499156" z3="-2.60057721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07552365" y3="2.89062635" z3="-2.46541528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18504135" y3="4.4784394" z3="0.54571182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.60730145" y3="3.94288667" z3="0.2870638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69626278" y3="2.4906763" z3="-1.66656646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.78085472" y3="2.00679851" z3="-3.46430461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62870646" y3="2.58011804" z3="-3.2382094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.96944187" y3="-5.79846481" z3="2.23356156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.64600708" y3="-6.24853985" z3="0.15989369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.01994468" y3="1.79548974" z3="-2.60938064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44599187" y3="2.81627322" z3="-0.76848776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.7916353" y3="0.19734727" z3="-1.84584937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08634387" y3="1.43245831" z3="-1.74538231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99776844" y3="0.13950892" z3="-2.59718358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47434983" y3="1.24691771" z3="-3.25377833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53430558" y3="-0.81265076" z3="-2.65337912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40025189" y3="1.18976541" z3="-3.83280762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58886583" y3="2.55136249" z3="-2.46755696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74995293" y3="2.46153543" z3="-3.19742256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03678962" y3="3.49284442" z3="-2.44637204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1132839" y3="3.33555297" z3="-3.74537263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56431071" y3="3.94778137" z3="-0.2787822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70434301" y3="5.08352485" z3="-0.21267612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88246336" y3="4.07223944" z3="0.24314655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33418868" y3="5.26684312" z3="0.75056446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53940141" y3="3.20014762" z3="0.2455089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35061487" y3="5.33627602" z3="1.14828897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20587527" y3="6.31003046" z3="0.30434902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.49369619" y3="6.40579981" z3="0.77012387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53883333" y3="7.17709634" z3="0.33545412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86715457" y3="7.3527353" z3="1.16972983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39982484" y3="-3.55988495" z3="-2.9797332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66765636" y3="-4.60965392" z3="-2.78476452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22648144" y3="-3.1001861" z3="-3.55356277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50638635" y3="-3.54239607" z3="-3.62345936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63256232" y3="-1.373547" z3="-1.89344298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42247673" y3="-0.70000731" z3="-2.27780491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.23173386" y3="-0.93615661" z3="-0.96627144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81490649" y3="-1.37292782" z3="-2.63237239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0656,-.9391,-.5502;6.7802,-1.9195,-1.3696;6.2511,-.9696,-1.245;4.8842,1.4861,-.9643;4.4111,.318,-.392;2.7284,2.6624,-1.1985;4.0608,2.7231,-.8286;2.3484,4.9615,-.6148;1.8389,3.77,-1.0743;1.6932,5.8338,-.5267;2.2201,1.4883,-1.6663;3.2368,.3467,.3024;1.8378,.3052,-.5768;.7104,.6613,.3188;1.8269,-.9612,-1.4058;1.0803,-2.4857,-1.2975;1.8919,-5.2818,-6.3929;1.6413,-4.8848,-5.405;.9825,-3.8405,-2.8955;1.6365,-3.5107,-5.1978;1.3473,-5.7526,-4.3509;1.0324,-5.2244,-3.1043;1.317,-2.9585,-3.9483;1.8749,-2.8126,-6.004;1.3766,-6.8359,-4.4933;.8378,-5.8893,-2.2583;.5932,-3.3382,-1.6282;-.4445,-3.8081,-.9243;-.8342,-4.7724,-1.2629;-.4901,-3.6053,.5418;-.6577,-3.3107,3.3232;-.9719,-4.6514,1.3394;-.0946,-2.4092,1.1512;-.1805,-2.2648,2.533;-1.0487,-4.5077,2.7223;-1.2559,-5.6002,.8753;.2636,-1.5585,.5684;.1372,-1.3203,2.9838;-1.3961,-5.3438,3.3353;-.7127,-3.2001,4.4101;1.291,-1.6238,-3.8496;1.4981,-1.2854,-2.9327;.3892,3.565,-1.3255;-2.1487,-2.7782,-1.7067;-2.9789,-3.0323,-.6118;-3.0997,-2.2684,.4222;-3.7842,-.7627,.957;-5.1548,-.3896,-.2516;-2.4713,.5447,1.0634;-4.4074,-1.2182,2.6596;-3.5794,-4.2113,-.5394;-4.3779,-4.5131,.5941;-4.7703,-.2046,-1.2697;-5.688,.5291,.0494;-5.8881,-1.2148,-.2977;-2.0186,.8187,.0967;-1.6336,.2336,1.7115;-2.923,1.456,1.4975;-4.8163,-.3327,3.1782;-5.2014,-1.9841,2.6185;-3.5763,-1.616,3.2692;-5.2672,-3.8612,.6248;-3.801,-4.3999,1.5251;-4.6916,-5.5574,.4633;4.3986,-2.1809,-.0778;4.1778,-3.2233,-.9886;3.4537,-4.3518,-.6231;2.9628,-4.4353,.6748;3.1998,-3.4384,1.6169;3.9114,-2.3093,1.2313;4.5271,-3.1215,-2.0193;3.2416,-5.1431,-1.343;2.1348,-5.5827,1.0538;2.7987,-3.5434,2.6256;4.0698,-1.5027,1.9492;-.5374,3.9693,-.3548;-1.8865,3.6655,-.4823;-2.303,2.9377,-1.5921;-1.4182,2.565,-2.6006;-.0755,2.8906,-2.4654;-.185,4.4784,.5457;-2.6073,3.9429,.2871;-3.6963,2.4907,-1.6666;-1.7809,2.0068,-3.4643;.6287,2.5801,-3.2382;1.9694,-5.7985,2.2336;1.646,-6.2485,.1599;-4.0199,1.7955,-2.6094;-4.446,2.8163,-.7685;6.7916,.1973,-1.8458;6.0863,1.4325,-1.7454;7.9978,.1395,-2.5972;8.4743,1.2469,-3.2538;8.5343,-.8127,-2.6534;9.4003,1.1898,-3.8328;6.5889,2.5514,-2.4676;7.75,2.4615,-3.1974;6.0368,3.4928,-2.4464;8.1133,3.3356,-3.7454;4.5643,3.9478,-.2788;3.7043,5.0835,-.2127;5.8825,4.0722,.2431;6.3342,5.2668,.7506;6.5394,3.2001,.2455;7.3506,5.3363,1.1483;4.2059,6.31,.3043;5.4937,6.4058,.7701;3.5388,7.1771,.3355;5.8672,7.3527,1.1697;-2.3998,-3.5599,-2.9797;-2.6677,-4.6097,-2.7848;-3.2265,-3.1002,-3.5536;-1.5064,-3.5424,-3.6235;-1.6326,-1.3735,-1.8934;-2.4225,-.7,-2.2778;-1.2317,-.9362,-.9663;-.8149,-1.3729,-2.6324;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661818514107</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001927522010 0.000199303372 0.035395080606 0.005338277902</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659328 -0.000201130 0.000048769 0.000153995 0.000177389 0.000234517 0.000294041 0.000375193 0.000403366 0.000492750 0.000631988 0.000740643 0.000759738 0.000765822 0.000830653 0.000896806 0.000942715 0.001115922 0.001174566 0.001203868 0.001247198 0.001356000 0.001408842 0.001430082 0.001471706 0.001735001 0.001819306 0.002027106 0.002134597 0.002798062 0.002990378 0.003114427 0.003347079 0.003677677 0.003917846 0.004180744 0.004304559 0.004488804 0.004785399 0.005553835 0.005560998 0.005900692 0.006104082 0.006544641 0.006788115 0.007258165 0.007540097 0.007877069 0.008172924 0.009226779 0.009336122 0.010107896 0.010277249 0.012421870 0.012747246 0.013222151 0.014229964 0.014585218 0.014889607 0.015274712 0.015750545 0.015879927 0.016122314 0.016396479 0.017311493 0.017965910 0.018376458 0.020282533 0.021027557 0.022189918 0.022996281 0.023194983 0.024498905 0.024920960 0.025948100 0.026462651 0.026721180 0.027760503 0.028935298 0.029686640 0.030412227 0.030996043 0.031839254 0.032667162 0.033677929 0.037051191 0.037691110 0.038338488 0.039092123 0.040066225 0.040756923 0.043127990 0.045258190 0.046123444 0.047103121 0.048159389 0.049669427 0.050666232 0.051321729 0.051556737 0.051799831 0.052281415 0.052386738 0.052539728 0.053793305 0.054709052 0.056491763 0.056836724 0.056958248 0.057203840 0.057572375 0.058383478 0.059197381 0.059488085 0.060241438 0.060471628 0.061436149 0.061678672 0.064546619 0.064601912 0.065527007 0.067695154 0.067961779 0.069197372 0.071585876 0.072647182 0.076354111 0.076912617 0.080004802 0.080946611 0.082078428 0.086284399 0.089450950 0.090799748 0.092574553 0.092837553 0.094162422 0.095114246 0.095286161 0.095862931 0.096359251 0.096852382 0.097714161 0.098162932 0.099277319 0.099433547 0.099992381 0.101231692 0.101956024 0.102645062 0.103672015 0.104218099 0.105032002 0.106504209 0.107315652 0.107852373 0.108671031 0.110120385 0.112551758 0.113338916 0.116026021 0.116459545 0.117145054 0.119414189 0.122726379 0.125537988 0.127579539 0.128181370 0.131116907 0.133028192 0.135109038 0.136685983 0.141958170 0.144359395 0.145043554 0.145700255 0.146688816 0.147483428 0.152479708 0.157233664 0.159718239 0.169704606 0.173847386 0.174625723 0.180357272 0.183145911 0.184766890 0.185311680 0.188025271 0.189520844 0.199987088 0.201755145 0.203273651 0.204622039 0.206772773 0.207126385 0.208875511 0.209515596 0.212240155 0.215090743 0.216464410 0.224677810 0.231447842 0.232375983 0.232965310 0.234902254 0.243969189 0.247997753 0.254233682 0.254982482 0.256667456 0.258669616 0.271367130 0.276161533 0.289386278 0.295184901 0.296989310 0.299147566 0.303761362 0.305846150 0.307519124 0.310666912 0.320010270 0.321769824 0.324624290 0.327585559 0.344195249 0.346250781 0.346749629 0.350415238 0.354644332 0.357935443 0.358914731 0.363821258 0.369227975 0.379870309 0.404322744 0.424738517 0.430016546 0.444297343 0.462407953 0.462984700 0.473307994 0.474638303 0.477886149 0.479430313 0.498018235 0.505589907 0.540766610 0.559715859 0.566698217 0.569443380 0.583212606 0.598788961 0.604134499 0.632990266 0.642775076 0.665254980 0.670028124 0.674528727 0.681281928 0.686051149 0.690867251 0.691596936 0.704240302 0.704734408 0.713451064 0.737027950 0.750678814 0.771569993 0.775823406 0.797854927 0.804086096 0.810675195 0.814663879 0.816193528 0.819440143 0.820157770 0.826910831 0.829327759 0.830453596 0.835143983 0.840487938 0.842116733 0.844586406 0.848591811 0.856394202 0.859237718 0.867332084 0.871636661 0.874888131 0.886483133 0.887695608 0.893543191 0.914727612 0.923898263 0.930841491 0.933611066 0.958344123 0.969107423 0.975819524 0.989116170 0.999612137 1.012915026 1.034005331 1.042602502 1.049150694 1.055208077 1.072721534 1.084180875 1.088639692 1.109989509 1.110584463 1.116090009 1.122411206 1.123318271 1.133999297 1.142159884 1.161138353 1.168703637 1.172568698 1.173186038 1.200369454 1.203626851 1.214304625 1.237037466 1.247541656 1.291699583 1.295693432 1.314023259 1.326038276 1.326393632 1.330133771 1.332517010 1.334418320 1.340914371 1.345755488 1.362010167 1.377187041 1.378844904 1.380938192 1.381559467 1.557327140 1.661621732 1.671871230</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">12</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06299191" y3="-0.93931924" z3="-0.55263567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77772665" y3="-1.9197844" z3="-1.37166141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24881378" y3="-0.9698203" z3="-1.24687254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88281508" y3="1.48623082" z3="-0.96522572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.4087744" y3="0.31785109" z3="-0.39409969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72791897" y3="2.66397431" z3="-1.19887058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06021702" y3="2.72353638" z3="-0.82849533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34847393" y3="4.96205627" z3="-0.61080439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83864459" y3="3.77151202" z3="-1.07232338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.6934097" y3="5.83422422" z3="-0.52085795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21944719" y3="1.49080387" z3="-1.66905441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.23375217" y3="0.34640291" z3="0.29931394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83573861" y3="0.30652841" z3="-0.58146353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.70737748" y3="0.66238332" z3="0.31323381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82515853" y3="-0.9591626" z3="-1.41143367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08018131" y3="-2.48473458" z3="-1.2998884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.88540305" y3="-5.28473814" z3="-6.39431993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63612931" y3="-4.887062" z3="-5.40636552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98078185" y3="-3.84102841" z3="-2.89660776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.63041137" y3="-3.51283657" z3="-5.20043427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34472899" y3="-5.75418339" z3="-4.35098785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03154254" y3="-5.22513647" z3="-3.1042929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31262823" y3="-2.95976372" z3="-3.95089125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8667459" y3="-2.81517443" z3="-6.00767828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37479051" y3="-6.83753396" z3="-4.49238961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.83896629" y3="-5.88942429" z3="-2.2573893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59328297" y3="-3.33798225" z3="-1.62903377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44292064" y3="-3.80816109" z3="-0.9230346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.83197339" y3="-4.7733318" z3="-1.25980242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.48615795" y3="-3.60407015" z3="0.54300855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.64907908" y3="-3.30708891" z3="3.32439889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.96360166" y3="-4.65067879" z3="1.34264031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09287793" y3="-2.406139" z3="1.15034737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17635446" y3="-2.26059565" z3="2.53224486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.038051" y3="-4.50578811" z3="2.72556859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.24583602" y3="-5.60077418" z3="0.88003754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.26152167" y3="-1.55494157" z3="0.56598171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13979904" y3="-1.31485846" z3="2.98136718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.38189641" y3="-5.3422486" z3="3.34000041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.70214664" y3="-3.19559718" z3="4.41130025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.28562737" y3="-1.62500738" z3="-3.85334901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49399448" y3="-1.285479" z3="-2.93722653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38877049" y3="3.56716979" z3="-1.32292627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14931671" y3="-2.78157465" z3="-1.70375195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97679563" y3="-3.03452155" z3="-0.60638061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09670289" y3="-2.26885284" z3="0.42652478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78373704" y3="-0.76100252" z3="0.95270594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.14264556" y3="-0.39077234" z3="-0.27075721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.47041171" y3="0.54495432" z3="1.06781873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.42292944" y3="-1.21104093" z3="2.65065637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.57535453" y3="-4.21433262" z3="-0.53065391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.37112297" y3="-4.51539054" z3="0.60502803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.7469168" y3="-0.21953697" z3="-1.28828991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.67449703" y3="0.53540076" z3="0.01397677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.87975977" y3="-1.21260927" z3="-0.31503161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-2.01122993" y3="0.81536378" z3="0.10558472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.63956018" y3="0.23497202" z3="1.72174653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.92518854" y3="1.45835831" z3="1.49483441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.83751407" y3="-0.32337151" z3="3.16158195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.21630457" y3="-1.97720795" z3="2.60446658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.59750197" y3="-1.60614583" z3="3.27007707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.26142204" y3="-3.86494483" z3="0.63623628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.79252497" y3="-4.39961726" z3="1.5346009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.68327021" y3="-5.56044037" z3="0.47671688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.39609068" y3="-2.18130048" z3="-0.08052702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17582059" y3="-3.22375873" z3="-0.99134714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45342146" y3="-4.353275" z3="-0.62544576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96375901" y3="-4.43761867" z3="0.67283594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19991625" y3="-3.44035933" z3="1.61480926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90963067" y3="-2.31031658" z3="1.22877468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52447661" y3="-3.12146356" z3="-2.02221517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24186193" y3="-5.14471305" z3="-1.34528631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.13816994" y3="-5.58655932" z3="1.05254226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79962861" y3="-3.54600597" z3="2.62382253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06752655" y3="-1.50356408" z3="1.94664487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53686482" y3="3.96915882" z3="-0.35028599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.886261" y3="3.66625348" z3="-0.47750617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30380875" y3="2.9414209" z3="-1.5888142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.41992305" y3="2.57071898" z3="-2.59880169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07709117" y3="2.89566156" z3="-2.4640267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18358178" y3="4.47589914" z3="0.55121272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.60636286" y3="3.94226523" z3="0.29300622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.69757769" y3="2.49637676" z3="-1.66406509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.78358425" y3="2.01497988" z3="-3.46369184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62633335" y3="2.58710055" z3="-3.23834487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.97553356" y3="-5.80354406" z3="2.23239889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.64861843" y3="-6.2523145" z3="0.15904906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.02113778" y3="1.80172614" z3="-2.60582771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4477512" y3="2.82313696" z3="-0.76743428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.79010994" y3="0.19726567" z3="-1.8467483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0853364" y3="1.43260628" z3="-1.74567174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99660754" y3="0.13946851" z3="-2.5975067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47403681" y3="1.24719325" z3="-3.25295353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.53274821" y3="-0.81288608" z3="-2.65417684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40022107" y3="1.19009008" z3="-3.83153885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58874942" y3="2.55187959" z3="-2.46665864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75017825" y3="2.46210988" z3="-3.19598396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03709186" y3="3.49359902" z3="-2.44496538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11421913" y3="3.33640728" z3="-3.74301756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56412621" y3="3.94718599" z3="-0.27675698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70451942" y3="5.08309471" z3="-0.20882463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88234527" y3="4.07045076" z3="0.24529736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.334488" y3="5.26416877" z3="0.75443425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53904479" y3="3.19817944" z3="0.24629385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35098393" y3="5.33269982" z3="1.15213628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20645494" y3="6.30867175" z3="0.31001019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.4943564" y3="6.4033629" z3="0.77577273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.53965962" y3="7.17587854" z3="0.34249027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86815329" y3="7.34959615" z3="1.1767281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40225715" y3="-3.56601446" z3="-2.97476654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66820824" y3="-4.6158065" z3="-2.77726639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23080636" y3="-3.10852576" z3="-3.5476499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51026939" y3="-3.54851794" z3="-3.62050625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63507181" y3="-1.37674024" z3="-1.89469219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42557062" y3="-0.70544222" z3="-2.28171321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.23531816" y3="-0.93582616" z3="-0.96874165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81707242" y3="-1.37730357" z3="-2.63325784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.063,-.9393,-.5526;6.7777,-1.9198,-1.3717;6.2488,-.9698,-1.2469;4.8828,1.4862,-.9652;4.4088,.3179,-.3941;2.7279,2.664,-1.1989;4.0602,2.7235,-.8285;2.3485,4.9621,-.6108;1.8386,3.7715,-1.0723;1.6934,5.8342,-.5209;2.2194,1.4908,-1.6691;3.2338,.3464,.2993;1.8357,.3065,-.5815;.7074,.6624,.3132;1.8252,-.9592,-1.4114;1.0802,-2.4847,-1.2999;1.8854,-5.2847,-6.3943;1.6361,-4.8871,-5.4064;.9808,-3.841,-2.8966;1.6304,-3.5128,-5.2004;1.3447,-5.7542,-4.351;1.0315,-5.2251,-3.1043;1.3126,-2.9598,-3.9509;1.8667,-2.8152,-6.0077;1.3748,-6.8375,-4.4924;.839,-5.8894,-2.2574;.5933,-3.338,-1.629;-.4429,-3.8082,-.923;-.832,-4.7733,-1.2598;-.4862,-3.6041,.543;-.6491,-3.3071,3.3244;-.9636,-4.6507,1.3426;-.0929,-2.4061,1.1503;-.1764,-2.2606,2.5322;-1.0381,-4.5058,2.7256;-1.2458,-5.6008,.88;.2615,-1.5549,.566;.1398,-1.3149,2.9814;-1.3819,-5.3422,3.34;-.7021,-3.1956,4.4113;1.2856,-1.625,-3.8533;1.494,-1.2855,-2.9372;.3888,3.5672,-1.3229;-2.1493,-2.7816,-1.7038;-2.9768,-3.0345,-.6064;-3.0967,-2.2689,.4265;-3.7837,-.761,.9527;-5.1426,-.3908,-.2708;-2.4704,.545,1.0678;-4.4229,-1.211,2.6507;-3.5754,-4.2143,-.5307;-4.3711,-4.5154,.605;-4.7469,-.2195,-1.2883;-5.6745,.5354,.014;-5.8798,-1.2126,-.315;-2.0112,.8154,.1056;-1.6396,.235,1.7217;-2.9252,1.4584,1.4948;-4.8375,-.3234,3.1616;-5.2163,-1.9772,2.6045;-3.5975,-1.6061,3.2701;-5.2614,-3.8649,.6362;-3.7925,-4.3996,1.5346;-4.6833,-5.5604,.4767;4.3961,-2.1813,-.0805;4.1758,-3.2238,-.9913;3.4534,-4.3533,-.6254;2.9638,-4.4376,.6728;3.1999,-3.4404,1.6148;3.9096,-2.3103,1.2288;4.5245,-3.1215,-2.0222;3.2419,-5.1447,-1.3453;2.1382,-5.5866,1.0525;2.7996,-3.546,2.6238;4.0675,-1.5036,1.9466;-.5369,3.9692,-.3503;-1.8863,3.6663,-.4775;-2.3038,2.9414,-1.5888;-1.4199,2.5707,-2.5988;-.0771,2.8957,-2.464;-.1836,4.4759,.5512;-2.6064,3.9423,.293;-3.6976,2.4964,-1.6641;-1.7836,2.015,-3.4637;.6263,2.5871,-3.2383;1.9755,-5.8035,2.2324;1.6486,-6.2523,.159;-4.0211,1.8017,-2.6058;-4.4478,2.8231,-.7674;6.7901,.1973,-1.8467;6.0853,1.4326,-1.7457;7.9966,.1395,-2.5975;8.474,1.2472,-3.253;8.5327,-.8129,-2.6542;9.4002,1.1901,-3.8315;6.5887,2.5519,-2.4667;7.7502,2.4621,-3.196;6.0371,3.4936,-2.445;8.1142,3.3364,-3.743;4.5641,3.9472,-.2768;3.7045,5.0831,-.2088;5.8823,4.0705,.2453;6.3345,5.2642,.7544;6.539,3.1982,.2463;7.351,5.3327,1.1521;4.2065,6.3087,.31;5.4944,6.4034,.7758;3.5397,7.1759,.3425;5.8682,7.3496,1.1767;-2.4023,-3.566,-2.9748;-2.6682,-4.6158,-2.7773;-3.2308,-3.1085,-3.5476;-1.5103,-3.5485,-3.6205;-1.6351,-1.3767,-1.8947;-2.4256,-.7054,-2.2817;-1.2353,-.9358,-.9687;-.8171,-1.3773,-2.6333;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661829648496</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001943913127 0.000196793446 0.024155862115 0.005337708870</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037659624 -0.000381351 0.000051281 0.000158686 0.000195683 0.000234525 0.000294885 0.000375398 0.000404168 0.000494162 0.000631991 0.000740430 0.000761972 0.000789872 0.000842287 0.000896805 0.000947319 0.001136496 0.001174555 0.001219717 0.001251978 0.001367265 0.001408923 0.001456647 0.001472309 0.001734974 0.001819278 0.002031832 0.002134684 0.002801742 0.002993308 0.003120238 0.003363191 0.003757700 0.003929628 0.004188158 0.004305006 0.004523769 0.004786073 0.005560281 0.005619667 0.005902167 0.006104150 0.006547896 0.006805265 0.007258142 0.007542454 0.007879266 0.008176064 0.009226990 0.009336787 0.010108457 0.010277246 0.012422151 0.012747252 0.013222632 0.014229956 0.014585470 0.014889758 0.015275402 0.015757275 0.015899699 0.016124372 0.016396520 0.017313500 0.017969493 0.018379593 0.020282533 0.021027665 0.022189874 0.022996270 0.023194972 0.024499031 0.024922300 0.025948113 0.026462730 0.026721227 0.027760502 0.028944033 0.029687419 0.030412258 0.030996201 0.031840019 0.032667434 0.033692058 0.037053180 0.037691335 0.038337556 0.039092046 0.040068561 0.040757101 0.043135074 0.045258228 0.046123441 0.047104002 0.048170352 0.049669429 0.050666226 0.051321724 0.051556737 0.051799828 0.052281415 0.052386738 0.052539728 0.053793313 0.054709053 0.056491765 0.056836723 0.056958264 0.057204023 0.057572556 0.058384183 0.059197666 0.059491320 0.060242265 0.060471756 0.061436143 0.061678684 0.064546628 0.064601934 0.065527056 0.067695114 0.067962580 0.069197997 0.071585890 0.072647180 0.076354145 0.076912673 0.080004805 0.080946846 0.082078434 0.086284410 0.089450948 0.090799736 0.092574572 0.092837556 0.094162483 0.095114239 0.095286162 0.095862936 0.096359230 0.096852419 0.097716881 0.098169523 0.099285666 0.099433677 0.100001895 0.101232448 0.101956018 0.102645509 0.103675383 0.104222074 0.105036624 0.106504592 0.107316030 0.107854294 0.108671459 0.110120398 0.112551755 0.113338951 0.116026004 0.116459543 0.117145212 0.119414655 0.122727098 0.125539676 0.127579456 0.128181666 0.131118985 0.133028183 0.135109026 0.136685966 0.141958182 0.144360340 0.145057965 0.145700635 0.146689412 0.147487760 0.152479692 0.157233652 0.159718154 0.169704642 0.173847396 0.174625756 0.180357275 0.183145926 0.184765453 0.185311456 0.188025265 0.189519936 0.199986622 0.201755081 0.203273967 0.204621988 0.206772771 0.207126391 0.208875575 0.209515676 0.212240164 0.215090747 0.216464331 0.224677855 0.231447842 0.232376016 0.232965334 0.234902261 0.243969362 0.247998055 0.254233777 0.254982485 0.256667459 0.258669936 0.271367129 0.276161594 0.289386281 0.295184937 0.296996486 0.299147922 0.303761935 0.305846199 0.307519144 0.310670280 0.320010306 0.321769823 0.324624696 0.327585834 0.344195367 0.346261272 0.346765779 0.350415716 0.354644333 0.357957906 0.358924786 0.363821254 0.369341184 0.379881624 0.404327273 0.424738400 0.430016886 0.444297344 0.462413430 0.462984704 0.473323247 0.474638939 0.477886149 0.479438802 0.498018241 0.505602525 0.540772375 0.559742225 0.566698403 0.569455514 0.583212607 0.598794274 0.604134964 0.632991138 0.642777343 0.665255052 0.670032616 0.674530189 0.681282088 0.686116089 0.690878100 0.691597425 0.704240308 0.704734643 0.713453780 0.737028341 0.750678817 0.771569999 0.775823449 0.797854913 0.804093865 0.810679789 0.814674984 0.816197390 0.819449210 0.820158693 0.827053141 0.829328431 0.830454179 0.835239481 0.840487933 0.842145953 0.844588192 0.848592516 0.856395363 0.859238011 0.867332109 0.871637733 0.874888436 0.886483172 0.887695703 0.893543479 0.914727870 0.923898279 0.930841767 0.933611172 0.958344123 0.969107740 0.975819570 0.989116176 0.999612138 1.012915059 1.034005384 1.042602508 1.049150702 1.055208081 1.072721711 1.084180883 1.088639708 1.109989511 1.110584465 1.116090079 1.122411208 1.123318270 1.133999316 1.142160379 1.161138501 1.168703662 1.172568702 1.173186072 1.200369542 1.203627699 1.214311616 1.237296719 1.247549786 1.291699696 1.295693509 1.314023757 1.326039435 1.326394074 1.330133796 1.332551546 1.334418427 1.340914377 1.345755587 1.362010151 1.377188325 1.378844969 1.380938198 1.381559503 1.557327237 1.661642191 1.671871438</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">13</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.06037068" y3="-0.9395704" z3="-0.55491314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77527881" y3="-1.92033304" z3="-1.37322313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24660558" y3="-0.97023247" z3="-1.24846679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88162382" y3="1.48623005" z3="-0.96627972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40647274" y3="0.31772172" z3="-0.39629635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7276877" y3="2.66555413" z3="-1.19963668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05987136" y3="2.72396023" z3="-0.82872841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34896807" y3="4.96263272" z3="-0.60722478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8387295" y3="3.77301225" z3="-1.07066765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69405942" y3="5.8347236" z3="-0.51542326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21902519" y3="1.49337585" z3="-1.67222383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.23076659" y3="0.34631745" z3="0.29600341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83370007" y3="0.30801471" z3="-0.58644343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.70439204" y3="0.66371718" z3="0.30720379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.8236095" y3="-0.95709648" z3="-1.41728349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08065946" y3="-2.48404014" z3="-1.30239393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87909091" y3="-5.28926307" z3="-6.39533889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63144987" y3="-4.89065671" z3="-5.40734262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98009062" y3="-3.8422467" z3="-2.89750255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.62526106" y3="-3.51621935" z3="-5.20290992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34259471" y3="-5.75679325" z3="-4.35044041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03137883" y3="-5.22655624" z3="-3.10376332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30948433" y3="-2.9619509" z3="-3.95336794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85961052" y3="-2.81928932" z3="-6.01137099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37307146" y3="-6.84028124" z3="-4.49067972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84071665" y3="-5.89003801" z3="-2.25578328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59418625" y3="-3.33816315" z3="-1.62984686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.44081395" y3="-3.80837803" z3="-0.92198663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.82888977" y3="-4.77468784" z3="-1.25658621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.48205135" y3="-3.60233336" z3="0.54394167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.63991624" y3="-3.30217323" z3="3.32530903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.95478893" y3="-4.64927118" z3="1.34594868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09118532" y3="-2.40238868" z3="1.1488474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17200317" y3="-2.25531334" z3="2.53073105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.02666129" y3="-4.50279372" z3="2.72888848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.23506821" y3="-5.60089117" z3="0.88527776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2590928" y3="-1.55072488" z3="0.56264052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14243523" y3="-1.30805557" z3="2.97788158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.3666998" y3="-5.33949393" z3="3.34512713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.69098606" y3="-3.18940918" z3="4.4121809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.28185785" y3="-1.62710043" z3="-3.85736506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49122074" y3="-1.28616363" z3="-2.94197254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38856856" y3="3.56948381" z3="-1.32011977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14882992" y3="-2.78597131" z3="-1.70239952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97427517" y3="-3.03721626" z3="-0.60308952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09437667" y3="-2.26846409" z3="0.42747795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78588869" y3="-0.75889156" z3="0.94417994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.13814694" y3="-0.39262032" z3="-0.28634437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.47126727" y3="0.54502504" z3="1.0695959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.43842038" y3="-1.20344592" z3="2.63881198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.57025477" y3="-4.21801062" z3="-0.5227869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.36328714" y3="-4.51738404" z3="0.61535299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.74150574" y3="-0.21247242" z3="-1.29864239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.675385" y3="0.52521256" z3="0.0037042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.87028496" y3="-1.21846089" z3="-0.33918747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.99297101" y3="0.81192895" z3="0.113782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.65208392" y3="0.23277818" z3="1.73974187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.928813" y3="1.46033346" z3="1.48858344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.85524909" y3="-0.313983" z3="3.14413226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.23246859" y3="-1.96862008" z3="2.58941549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.61849378" y3="-1.59788354" z3="3.26560579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.25532369" y3="-3.86923107" z3="0.64571716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.78335433" y3="-4.39677899" z3="1.54360112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.67280791" y3="-5.56381643" z3="0.49113851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.39357027" y3="-2.18163377" z3="-0.08290792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17414956" y3="-3.22445567" z3="-0.99351757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45351553" y3="-4.35492199" z3="-0.62708023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96484827" y3="-4.43987233" z3="0.67153106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19973337" y3="-3.44197683" z3="1.61313642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90751234" y3="-2.31091135" z3="1.22652142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5223478" y3="-3.12190187" z3="-2.02451149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24276494" y3="-5.14679742" z3="-1.34668025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.14176744" y3="-5.59029739" z3="1.0520229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.80007869" y3="-3.54802847" z3="2.62236121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06452122" y3="-1.50375178" z3="1.94413409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53548091" y3="3.96906054" z3="-0.34497644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88522144" y3="3.66756057" z3="-0.47135185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3049031" y3="2.94703337" z3="-1.58468252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42256908" y3="2.57860206" z3="-2.59687982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.07915897" y3="2.90148276" z3="-2.4624761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.18064574" y3="4.47299819" z3="0.55748032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.60418512" y3="3.94214156" z3="0.30071551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70012513" y3="2.50644683" z3="-1.66140679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.78798363" y3="2.02646551" z3="-3.46337139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.62303305" y3="2.59463463" z3="-3.2385839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.98205173" y3="-5.80860186" z3="2.23205486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.65118949" y3="-6.25593553" z3="0.15896585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.0295351" y3="1.82569649" z3="-2.61329987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44605005" y3="2.82374214" z3="-0.7565175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78876228" y3="0.19688201" z3="-1.84748388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08457516" y3="1.43250424" z3="-1.7460005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99565964" y3="0.13897206" z3="-2.59759191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47401982" y3="1.24690401" z3="-3.25200791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.5313597" y3="-0.81361007" z3="-2.65458947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40050374" y3="1.18972373" z3="-3.83010361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58897755" y3="2.55204073" z3="-2.46588507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.7507714" y3="2.4621714" z3="-3.19460701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03778337" y3="3.49402746" z3="-2.44380981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11559208" y3="3.33665725" z3="-3.74081786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56428431" y3="3.94653313" z3="-0.27505732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70512414" y3="5.08266743" z3="-0.20538362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88252874" y3="4.068512" z3="0.2472532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33510571" y3="5.26129208" z3="0.75820671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53893539" y3="3.19602307" z3="0.24690203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35162075" y3="5.32883943" z3="1.15602928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20749445" y3="6.30727657" z3="0.31531369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.495417" y3="6.40078124" z3="0.78124587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.54100681" y3="7.17466948" z3="0.34910088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.86956617" y3="7.34626714" z3="1.18363759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40336359" y3="-3.57388641" z3="-2.97100883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66741673" y3="-4.6235718" z3="-2.77034611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23385864" y3="-3.11893901" z3="-3.54311781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51281423" y3="-3.55668868" z3="-3.61873526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6364466" y3="-1.38114959" z3="-1.89818231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42690523" y3="-0.71262745" z3="-2.2899528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.23915056" y3="-0.93580562" z3="-0.97332529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81707361" y3="-1.38344041" z3="-2.63519262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0604,-.9396,-.5549;6.7753,-1.9203,-1.3732;6.2466,-.9702,-1.2485;4.8816,1.4862,-.9663;4.4065,.3177,-.3963;2.7277,2.6656,-1.1996;4.0599,2.724,-.8287;2.349,4.9626,-.6072;1.8387,3.773,-1.0707;1.6941,5.8347,-.5154;2.219,1.4934,-1.6722;3.2308,.3463,.296;1.8337,.308,-.5864;.7044,.6637,.3072;1.8236,-.9571,-1.4173;1.0807,-2.484,-1.3024;1.8791,-5.2893,-6.3953;1.6314,-4.8907,-5.4073;.9801,-3.8422,-2.8975;1.6253,-3.5162,-5.2029;1.3426,-5.7568,-4.3504;1.0314,-5.2266,-3.1038;1.3095,-2.962,-3.9534;1.8596,-2.8193,-6.0114;1.3731,-6.8403,-4.4907;.8407,-5.89,-2.2558;.5942,-3.3382,-1.6298;-.4408,-3.8084,-.922;-.8289,-4.7747,-1.2566;-.4821,-3.6023,.5439;-.6399,-3.3022,3.3253;-.9548,-4.6493,1.3459;-.0912,-2.4024,1.1488;-.172,-2.2553,2.5307;-1.0267,-4.5028,2.7289;-1.2351,-5.6009,.8853;.2591,-1.5507,.5626;.1424,-1.3081,2.9779;-1.3667,-5.3395,3.3451;-.691,-3.1894,4.4122;1.2819,-1.6271,-3.8574;1.4912,-1.2862,-2.942;.3886,3.5695,-1.3201;-2.1488,-2.786,-1.7024;-2.9743,-3.0372,-.6031;-3.0944,-2.2685,.4275;-3.7859,-.7589,.9442;-5.1381,-.3926,-.2863;-2.4713,.545,1.0696;-4.4384,-1.2034,2.6388;-3.5703,-4.218,-.5228;-4.3633,-4.5174,.6154;-4.7415,-.2125,-1.2986;-5.6754,.5252,.0037;-5.8703,-1.2185,-.3392;-1.993,.8119,.1138;-1.6521,.2328,1.7397;-2.9288,1.4603,1.4886;-4.8552,-.314,3.1441;-5.2325,-1.9686,2.5894;-3.6185,-1.5979,3.2656;-5.2553,-3.8692,.6457;-3.7834,-4.3968,1.5436;-4.6728,-5.5638,.4911;4.3936,-2.1816,-.0829;4.1741,-3.2245,-.9935;3.4535,-4.3549,-.6271;2.9648,-4.4399,.6715;3.1997,-3.442,1.6131;3.9075,-2.3109,1.2265;4.5223,-3.1219,-2.0245;3.2428,-5.1468,-1.3467;2.1418,-5.5903,1.052;2.8001,-3.548,2.6224;4.0645,-1.5038,1.9441;-.5355,3.9691,-.345;-1.8852,3.6676,-.4714;-2.3049,2.947,-1.5847;-1.4226,2.5786,-2.5969;-.0792,2.9015,-2.4625;-.1806,4.473,.5575;-2.6042,3.9421,.3007;-3.7001,2.5064,-1.6614;-1.788,2.0265,-3.4634;.623,2.5946,-3.2386;1.9821,-5.8086,2.2321;1.6512,-6.2559,.159;-4.0295,1.8257,-2.6133;-4.4461,2.8237,-.7565;6.7888,.1969,-1.8475;6.0846,1.4325,-1.746;7.9957,.139,-2.5976;8.474,1.2469,-3.252;8.5314,-.8136,-2.6546;9.4005,1.1897,-3.8301;6.589,2.552,-2.4659;7.7508,2.4622,-3.1946;6.0378,3.494,-2.4438;8.1156,3.3367,-3.7408;4.5643,3.9465,-.2751;3.7051,5.0827,-.2054;5.8825,4.0685,.2473;6.3351,5.2613,.7582;6.5389,3.196,.2469;7.3516,5.3288,1.156;4.2075,6.3073,.3153;5.4954,6.4008,.7812;3.541,7.1747,.3491;5.8696,7.3463,1.1836;-2.4034,-3.5739,-2.971;-2.6674,-4.6236,-2.7703;-3.2339,-3.1189,-3.5431;-1.5128,-3.5567,-3.6187;-1.6364,-1.3811,-1.8982;-2.4269,-.7126,-2.29;-1.2392,-.9358,-.9733;-.8171,-1.3834,-2.6352;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661834056315</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003287818722 0.000347492873 0.036510502951 0.005335214560</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037660012 -0.000743424 0.000051543 0.000158706 0.000195660 0.000235138 0.000295268 0.000375837 0.000405838 0.000494234 0.000632416 0.000742113 0.000761972 0.000794399 0.000844103 0.000896809 0.000947759 0.001142270 0.001174655 0.001227208 0.001265437 0.001399235 0.001410758 0.001468046 0.001607088 0.001735288 0.001826318 0.002041824 0.002134637 0.002852371 0.002996357 0.003123330 0.003363299 0.003843951 0.003975210 0.004214756 0.004309672 0.004575368 0.004793355 0.005560579 0.005686945 0.005902674 0.006105745 0.006551979 0.006855399 0.007258145 0.007561680 0.007883620 0.008187471 0.009227070 0.009339474 0.010110107 0.010277754 0.012422815 0.012747397 0.013225079 0.014229977 0.014585935 0.014890139 0.015277399 0.015766538 0.015963246 0.016132233 0.016396519 0.017322737 0.017980296 0.018390031 0.020282546 0.021027984 0.022189907 0.022996381 0.023195010 0.024500246 0.024938706 0.025948141 0.026463697 0.026721472 0.027760587 0.028946473 0.029687788 0.030412248 0.030996904 0.031841798 0.032669450 0.033731092 0.037056072 0.037696719 0.038339488 0.039092449 0.040082015 0.040757965 0.043158163 0.045258233 0.046123533 0.047103829 0.048173586 0.049669429 0.050666265 0.051321871 0.051556788 0.051799826 0.052281416 0.052386740 0.052539722 0.053793378 0.054709088 0.056491764 0.056836722 0.056958330 0.057204974 0.057573632 0.058387747 0.059198824 0.059503824 0.060244961 0.060472342 0.061436392 0.061678912 0.064546719 0.064602140 0.065527135 0.067695095 0.067965036 0.069199696 0.071586046 0.072647176 0.076354149 0.076912953 0.080005404 0.080947470 0.082078480 0.086284586 0.089450983 0.090799752 0.092574641 0.092837553 0.094162499 0.095114237 0.095286171 0.095862936 0.096359402 0.096852405 0.097717691 0.098183019 0.099290880 0.099433694 0.100012954 0.101233177 0.101956326 0.102646029 0.103677452 0.104222617 0.105036997 0.106505078 0.107316627 0.107856425 0.108671847 0.110120524 0.112551850 0.113339028 0.116026019 0.116459551 0.117145678 0.119415308 0.122729189 0.125543811 0.127580197 0.128182110 0.131122457 0.133028199 0.135109037 0.136685870 0.141958386 0.144362518 0.145098368 0.145701142 0.146689493 0.147511447 0.152479739 0.157233838 0.159718157 0.169704773 0.173847336 0.174626033 0.180357275 0.183145936 0.184772121 0.185312386 0.188025247 0.189521386 0.199997175 0.201755323 0.203274772 0.204622070 0.206772805 0.207126396 0.208875577 0.209515697 0.212240208 0.215090747 0.216465249 0.224677968 0.231447841 0.232376113 0.232965340 0.234902298 0.243970010 0.247999727 0.254233885 0.254982616 0.256667456 0.258670850 0.271367157 0.276161647 0.289386318 0.295185002 0.297016831 0.299148934 0.303763413 0.305846433 0.307519225 0.310679472 0.320010521 0.321769821 0.324625646 0.327586242 0.344195321 0.346283279 0.346794895 0.350416316 0.354644357 0.358086993 0.358985153 0.363821331 0.369512751 0.379909450 0.404338572 0.424738489 0.430017170 0.444297384 0.462425529 0.462984758 0.473357041 0.474641214 0.477886147 0.479460564 0.498018271 0.505630628 0.540784737 0.559798871 0.566698978 0.569483332 0.583212891 0.598845290 0.604136097 0.632996243 0.642781847 0.665255236 0.670043213 0.674559588 0.681282663 0.686285319 0.690906297 0.691599250 0.704240320 0.704735217 0.713459656 0.737029103 0.750678823 0.771570016 0.775823562 0.797854923 0.804157573 0.810747021 0.814684015 0.816202070 0.819462253 0.820159503 0.827262912 0.829328557 0.830455489 0.835464125 0.840487931 0.842233390 0.844590740 0.848594133 0.856397018 0.859238351 0.867332189 0.871639905 0.874889048 0.886483296 0.887696366 0.893544121 0.914728499 0.923898312 0.930842126 0.933611307 0.958344162 0.969108181 0.975819596 0.989116225 0.999612144 1.012915145 1.034005562 1.042602553 1.049150703 1.055208090 1.072722126 1.084180918 1.088639753 1.109989516 1.110584466 1.116090286 1.122411209 1.123318269 1.133999571 1.142162250 1.161138840 1.168703707 1.172568716 1.173186177 1.200369652 1.203629311 1.214328608 1.237850124 1.247567731 1.291700030 1.295693702 1.314024774 1.326041455 1.326395124 1.330133802 1.332611584 1.334418649 1.340914577 1.345755587 1.362010199 1.377190812 1.378845007 1.380938209 1.381559669 1.557327234 1.661697206 1.671871440</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">14</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.05810606" y3="-0.93979739" z3="-0.55774494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77303415" y3="-1.92085733" z3="-1.37566917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24463148" y3="-0.97061957" z3="-1.25081488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8807596" y3="1.48631307" z3="-0.96777865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40461827" y3="0.31765149" z3="-0.39891098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72774554" y3="2.6673991" z3="-1.20034365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05989065" y3="2.72449455" z3="-0.82910891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.34998696" y3="4.96337392" z3="-0.60301836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83916199" y3="3.77483747" z3="-1.06859467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69530631" y3="5.8354069" z3="-0.50904431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21883519" y3="1.49626374" z3="-1.6753854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.2284007" y3="0.34633235" z3="0.29248354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.8320924" y3="0.30983879" z3="-0.59130507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.70235315" y3="0.66580983" z3="0.30168206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.82201565" y3="-0.95472352" z3="-1.42294069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08075252" y3="-2.48288776" z3="-1.3051036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.8740522" y3="-5.29404315" z3="-6.39581584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62769144" y3="-4.89436838" z3="-5.40794353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97924868" y3="-3.84320768" z3="-2.89848774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.62127288" y3="-3.51971236" z3="-5.20509646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34067753" y3="-5.75935508" z3="-4.34962779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03090143" y3="-5.22775339" z3="-3.10319547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30701876" y3="-2.96405329" z3="-3.9557858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85422426" y3="-2.82364204" z3="-6.01467378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37142029" y3="-6.84299793" z3="-4.4886245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.8416584" y3="-5.89036954" z3="-2.25424871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59445621" y3="-3.33771008" z3="-1.6310154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.43894659" y3="-3.80807623" z3="-0.92098709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.82649935" y3="-4.7752655" z3="-1.25372213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.47842657" y3="-3.59992602" z3="0.54465288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.63103247" y3="-3.29655275" z3="3.32589688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.94639964" y3="-4.64718191" z3="1.34901204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09019132" y3="-2.39787949" z3="1.147023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16822364" y3="-2.24925832" z3="2.52887336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.01556627" y3="-4.49909519" z3="2.73193543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.22467824" y3="-5.6003111" z3="0.89025938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2559037" y3="-1.54585162" z3="0.55890134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14443767" y3="-1.30045235" z3="2.97394682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.35165586" y3="-5.33603556" z3="3.34999634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.67985912" y3="-3.18259419" z3="4.41274341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.279199" y3="-1.62912616" z3="-3.86143374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48885753" y3="-1.28674244" z3="-2.94665887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38863559" y3="3.57235219" z3="-1.31670935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14973029" y3="-2.789109" z3="-1.70093593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97304866" y3="-3.03869843" z3="-0.59958724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09383942" y3="-2.26718651" z3="0.42902259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.7896913" y3="-0.75801066" z3="0.94059604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.13263527" y3="-0.39510661" z3="-0.30258245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.47691541" y3="0.5469648" z3="1.0718178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.45240493" y3="-1.19942087" z3="2.63126822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.56610748" y3="-4.22066734" z3="-0.51539645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.35648846" y3="-4.51938685" z3="0.62463778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.72164642" y3="-0.2309131" z3="-1.31654596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.67101988" y3="0.53349039" z3="-0.03280631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.86721549" y3="-1.2188509" z3="-0.35175856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.98813534" y3="0.80475088" z3="0.11999958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.66712972" y3="0.24110973" z3="1.75536732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.94213363" y3="1.46672136" z3="1.47517149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.87057599" y3="-0.30802969" z3="3.13187728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.24762592" y3="-1.96312917" z3="2.57856149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.63702249" y3="-1.5936588" z3="3.26350085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.25070714" y3="-3.87423589" z3="0.65430814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.77569755" y3="-4.39421231" z3="1.5516561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.66258726" y3="-5.56716975" z3="0.50388121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.39135618" y3="-2.18190622" z3="-0.08578237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17271185" y3="-3.22512505" z3="-0.99612989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45364052" y3="-4.35640796" z3="-0.62914812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96581872" y3="-4.44179282" z3="0.66974996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19953629" y3="-3.44326321" z3="1.61096079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90560889" y3="-2.31132853" z3="1.22376009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.52056211" y3="-3.12244837" z3="-2.02722702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24366288" y3="-5.14874315" z3="-1.34847229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.14500585" y3="-5.59352462" z3="1.05100641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.80041496" y3="-3.54957932" z3="2.62037571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06178767" y3="-1.5037563" z3="1.94109231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53376888" y3="3.96957299" z3="-0.33906509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88385616" y3="3.66908874" z3="-0.46422673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30537848" y3="2.9514988" z3="-1.57864681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42473325" y3="2.58544971" z3="-2.59314271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08106549" y3="2.90773583" z3="-2.46018483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.17730513" y3="4.47072689" z3="0.56428833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.60154234" y3="3.942221" z3="0.30955435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70046536" y3="2.51097667" z3="-1.65399503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.79177141" y3="2.03580499" z3="-3.4604695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.61965012" y3="2.60318945" z3="-3.23852572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.98820714" y3="-5.81313385" z3="2.23117232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.65323272" y3="-6.25891886" z3="0.15840369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.02855246" y3="1.82679478" z3="-2.60081122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44727151" y3="2.83127232" z3="-0.75235019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78757142" y3="0.19655444" z3="-1.8489899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08402799" y3="1.4324855" z3="-1.7469316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99476646" y3="0.13854469" z3="-2.59860559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47402901" y3="1.24672059" z3="-3.25194822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52997664" y3="-0.81428432" z3="-2.65607592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40074013" y3="1.18946896" z3="-3.82966844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58939021" y3="2.55232695" z3="-2.46565557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75146379" y3="2.46237205" z3="-3.19390941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0387062" y3="3.49460572" z3="-2.44301973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11705428" y3="3.33708588" z3="-3.7392379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56495651" y3="3.94583319" z3="-0.27331118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70631522" y3="5.08222158" z3="-0.20149015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88330402" y3="4.06632179" z3="0.24909548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33644381" y3="5.25800955" z3="0.762101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53936628" y3="3.19357613" z3="0.247093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35303084" y3="5.32441201" z3="1.15992991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.20925384" y3="6.30570584" z3="0.32128999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.49726468" y3="6.397836" z3="0.78723496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.54311782" y3="7.17330783" z3="0.35668189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.87186922" y3="7.34245299" z3="1.19124129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40478853" y3="-3.58080438" z3="-2.96713864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66679166" y3="-4.63040307" z3="-2.76351643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23679464" y3="-3.12870974" z3="-3.53932181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51514586" y3="-3.56385685" z3="-3.61612035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6391043" y3="-1.38442415" z3="-1.90146815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42988238" y3="-0.71869844" z3="-2.29715795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.24388605" y3="-0.93483788" z3="-0.97780036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81858617" y3="-1.38843763" z3="-2.63719593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0581,-.9398,-.5577;6.773,-1.9209,-1.3757;6.2446,-.9706,-1.2508;4.8808,1.4863,-.9678;4.4046,.3177,-.3989;2.7277,2.6674,-1.2003;4.0599,2.7245,-.8291;2.35,4.9634,-.603;1.8392,3.7748,-1.0686;1.6953,5.8354,-.509;2.2188,1.4963,-1.6754;3.2284,.3463,.2925;1.8321,.3098,-.5913;.7024,.6658,.3017;1.822,-.9547,-1.4229;1.0808,-2.4829,-1.3051;1.8741,-5.294,-6.3958;1.6277,-4.8944,-5.4079;.9792,-3.8432,-2.8985;1.6213,-3.5197,-5.2051;1.3407,-5.7594,-4.3496;1.0309,-5.2278,-3.1032;1.307,-2.9641,-3.9558;1.8542,-2.8236,-6.0147;1.3714,-6.843,-4.4886;.8417,-5.8904,-2.2542;.5945,-3.3377,-1.631;-.4389,-3.8081,-.921;-.8265,-4.7753,-1.2537;-.4784,-3.5999,.5447;-.631,-3.2966,3.3259;-.9464,-4.6472,1.349;-.0902,-2.3979,1.147;-.1682,-2.2493,2.5289;-1.0156,-4.4991,2.7319;-1.2247,-5.6003,.8903;.2559,-1.5459,.5589;.1444,-1.3005,2.9739;-1.3517,-5.336,3.35;-.6799,-3.1826,4.4127;1.2792,-1.6291,-3.8614;1.4889,-1.2867,-2.9467;.3886,3.5724,-1.3167;-2.1497,-2.7891,-1.7009;-2.973,-3.0387,-.5996;-3.0938,-2.2672,.429;-3.7897,-.758,.9406;-5.1326,-.3951,-.3026;-2.4769,.547,1.0718;-4.4524,-1.1994,2.6313;-3.5661,-4.2207,-.5154;-4.3565,-4.5194,.6246;-4.7216,-.2309,-1.3165;-5.671,.5335,-.0328;-5.8672,-1.2189,-.3518;-1.9881,.8048,.12;-1.6671,.2411,1.7554;-2.9421,1.4667,1.4752;-4.8706,-.308,3.1319;-5.2476,-1.9631,2.5786;-3.637,-1.5937,3.2635;-5.2507,-3.8742,.6543;-3.7757,-4.3942,1.5517;-4.6626,-5.5672,.5039;4.3914,-2.1819,-.0858;4.1727,-3.2251,-.9961;3.4536,-4.3564,-.6291;2.9658,-4.4418,.6697;3.1995,-3.4433,1.611;3.9056,-2.3113,1.2238;4.5206,-3.1224,-2.0272;3.2437,-5.1487,-1.3485;2.145,-5.5935,1.051;2.8004,-3.5496,2.6204;4.0618,-1.5038,1.9411;-.5338,3.9696,-.3391;-1.8839,3.6691,-.4642;-2.3054,2.9515,-1.5786;-1.4247,2.5854,-2.5931;-.0811,2.9077,-2.4602;-.1773,4.4707,.5643;-2.6015,3.9422,.3096;-3.7005,2.511,-1.654;-1.7918,2.0358,-3.4605;.6197,2.6032,-3.2385;1.9882,-5.8131,2.2312;1.6532,-6.2589,.1584;-4.0286,1.8268,-2.6008;-4.4473,2.8313,-.7524;6.7876,.1966,-1.849;6.084,1.4325,-1.7469;7.9948,.1385,-2.5986;8.474,1.2467,-3.2519;8.53,-.8143,-2.6561;9.4007,1.1895,-3.8297;6.5894,2.5523,-2.4657;7.7515,2.4624,-3.1939;6.0387,3.4946,-2.443;8.1171,3.3371,-3.7392;4.565,3.9458,-.2733;3.7063,5.0822,-.2015;5.8833,4.0663,.2491;6.3364,5.258,.7621;6.5394,3.1936,.2471;7.353,5.3244,1.1599;4.2093,6.3057,.3213;5.4973,6.3978,.7872;3.5431,7.1733,.3567;5.8719,7.3425,1.1912;-2.4048,-3.5808,-2.9671;-2.6668,-4.6304,-2.7635;-3.2368,-3.1287,-3.5393;-1.5151,-3.5639,-3.6161;-1.6391,-1.3844,-1.9015;-2.4299,-.7187,-2.2972;-1.2439,-.9348,-.9778;-.8186,-1.3884,-2.6372;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661842190064</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003755800113 0.000393984349 0.023603527759 0.005335485607</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037661009 -0.001060548 0.000054041 0.000158789 0.000202373 0.000235391 0.000295925 0.000377004 0.000406666 0.000494559 0.000632417 0.000746040 0.000762989 0.000794400 0.000845078 0.000901883 0.000947997 0.001142304 0.001175019 0.001227519 0.001266714 0.001397733 0.001410829 0.001468978 0.001648831 0.001735372 0.001828759 0.002059186 0.002134560 0.002914095 0.002998626 0.003124062 0.003363524 0.003906228 0.004020012 0.004307371 0.004379801 0.004715415 0.004796430 0.005560979 0.005683200 0.005903146 0.006107125 0.006563379 0.006910924 0.007260934 0.007655360 0.007894329 0.008224805 0.009227580 0.009352976 0.010111492 0.010278435 0.012425847 0.012747442 0.013229865 0.014230069 0.014587336 0.014890308 0.015279039 0.015774543 0.016062692 0.016198419 0.016396939 0.017341790 0.018004726 0.018415088 0.020282536 0.021028164 0.022189898 0.022996693 0.023195216 0.024503301 0.024991649 0.025948241 0.026465990 0.026722327 0.027760645 0.028946684 0.029687743 0.030412247 0.030997282 0.031846586 0.032673885 0.033830905 0.037059123 0.037714718 0.038347626 0.039093937 0.040112153 0.040759896 0.043208884 0.045258244 0.046123778 0.047105647 0.048173527 0.049669429 0.050666375 0.051322145 0.051556882 0.051799826 0.052281418 0.052386747 0.052539745 0.053793422 0.054709119 0.056491775 0.056836722 0.056958502 0.057206672 0.057575710 0.058394191 0.059201055 0.059531241 0.060251616 0.060473066 0.061436832 0.061679157 0.064546901 0.064602444 0.065527190 0.067695126 0.067970637 0.069204367 0.071586468 0.072647172 0.076354184 0.076913647 0.080005437 0.080947535 0.082078557 0.086284940 0.089451025 0.090799785 0.092574937 0.092837554 0.094162495 0.095114288 0.095286168 0.095862974 0.096359330 0.096852432 0.097722300 0.098196205 0.099293411 0.099433674 0.100026805 0.101234656 0.101956669 0.102646706 0.103680481 0.104225581 0.105037528 0.106505557 0.107318101 0.107864353 0.108672377 0.110120628 0.112552020 0.113339127 0.116026278 0.116459548 0.117146542 0.119415362 0.122732234 0.125550757 0.127580396 0.128183475 0.131125842 0.133028196 0.135109003 0.136685803 0.141958865 0.144362237 0.145100156 0.145701965 0.146689710 0.147568760 0.152479690 0.157233935 0.159718531 0.169705019 0.173847757 0.174626240 0.180357367 0.183145929 0.184798687 0.185319094 0.188025486 0.189529731 0.200059043 0.201756349 0.203276315 0.204622224 0.206772861 0.207126404 0.208875711 0.209516015 0.212240249 0.215090742 0.216465992 0.224678170 0.231447849 0.232376256 0.232965485 0.234902328 0.243971131 0.248001361 0.254234047 0.254982724 0.256667458 0.258672715 0.271367158 0.276161743 0.289386478 0.295185240 0.297048556 0.299150000 0.303765626 0.305846659 0.307519338 0.310694259 0.320010635 0.321769822 0.324627152 0.327587037 0.344195840 0.346291472 0.346804671 0.350416365 0.354644445 0.358363983 0.359193711 0.363821898 0.369534509 0.379941898 0.404352770 0.424745764 0.430018053 0.444297496 0.462443754 0.462985060 0.473398423 0.474659307 0.477886209 0.479497221 0.498018280 0.505678585 0.540803700 0.559885534 0.566699856 0.569533281 0.583213959 0.599137427 0.604138504 0.633023755 0.642788809 0.665255730 0.670061673 0.674710894 0.681282972 0.686326222 0.690906948 0.691599250 0.704240329 0.704736029 0.713467475 0.737030725 0.750678830 0.771570035 0.775823738 0.797854958 0.804344598 0.811009113 0.814689684 0.816202429 0.819471393 0.820159525 0.827385729 0.829328558 0.830458190 0.835823977 0.840487929 0.842347092 0.844594677 0.848596984 0.856398140 0.859238411 0.867332293 0.871644075 0.874889919 0.886483281 0.887696378 0.893545526 0.914729169 0.923898402 0.930842667 0.933611645 0.958344204 0.969108854 0.975819730 0.989116309 0.999612148 1.012915146 1.034005772 1.042602559 1.049150794 1.055208095 1.072722136 1.084180938 1.088639778 1.109989525 1.110584471 1.116090300 1.122411217 1.123318268 1.133999669 1.142163383 1.161139015 1.168703796 1.172568735 1.173186375 1.200369895 1.203632542 1.214351067 1.238765327 1.247593322 1.291700857 1.295694045 1.314026811 1.326045554 1.326396809 1.330134062 1.332725127 1.334419012 1.340914879 1.345755737 1.362010135 1.377196508 1.378845282 1.380938235 1.381559872 1.557327272 1.661808744 1.671871858</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">15</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.05581501" y3="-0.93984264" z3="-0.56060316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.77078432" y3="-1.92142803" z3="-1.37784319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24272553" y3="-0.97099117" z3="-1.25304614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.88020661" y3="1.4865276" z3="-0.96947556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40279434" y3="0.31781803" z3="-0.40171908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7283626" y3="2.66958294" z3="-1.20159646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06041148" y3="2.72527118" z3="-0.82988494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35163638" y3="4.96444756" z3="-0.59939127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84021427" y3="3.77702512" z3="-1.06716443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69721814" y3="5.83643473" z3="-0.50319602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21912212" y3="1.49951508" z3="-1.6790666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22591822" y3="0.34674697" z3="0.28861477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.83045697" y3="0.31217898" z3="-0.59670639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69991961" y3="0.66852321" z3="0.29522296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.820337" y3="-0.95187147" z3="-1.42906535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08059123" y3="-2.48120945" z3="-1.30803925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87020087" y3="-5.29906755" z3="-6.39567282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62471605" y3="-4.89820094" z3="-5.40807423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97858169" y3="-3.84403775" z3="-2.89925301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.61775701" y3="-3.5232739" z3="-5.207059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33931547" y3="-5.76192767" z3="-4.34828217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03070832" y3="-5.22883228" z3="-3.10221097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30452503" y3="-2.96611762" z3="-3.95816238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84941352" y3="-2.82814384" z3="-6.01782576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37041224" y3="-6.8457463" z3="-4.48584308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84275711" y3="-5.89046302" z3="-2.25220325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59499965" y3="-3.33712679" z3="-1.63200916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.43729771" y3="-3.80750492" z3="-0.92007082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.82338496" y3="-4.77612687" z3="-1.25022084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.47454236" y3="-3.59722002" z3="0.54547769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.62264674" y3="-3.28964427" z3="3.32650758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.93783855" y3="-4.64451895" z3="1.35245135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08893896" y3="-2.39297103" z3="1.14509525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16473106" y3="-2.24221136" z3="2.52681401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.0046444" y3="-4.49435708" z3="2.73530599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.21411491" y3="-5.59928544" z3="0.89587253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2531313" y3="-1.54075396" z3="0.55490593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14574108" y3="-1.29159513" z3="2.96957991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.33690805" y3="-5.33132639" z3="3.35539014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.66969898" y3="-3.17402166" z3="4.41326263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27577768" y3="-1.63105551" z3="-3.86569523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48624755" y3="-1.28703167" z3="-2.95169891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38933203" y3="3.57516226" z3="-1.31355277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14926312" y3="-2.79371047" z3="-1.69934876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97069822" y3="-3.04268224" z3="-0.59628271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09083171" y3="-2.26956382" z3="0.43131053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79228296" y3="-0.75836073" z3="0.93127159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.1282105" y3="-0.39918865" z3="-0.31916767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48254606" y3="0.54888075" z3="1.07044283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.46957318" y3="-1.19314864" z3="2.61955232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.56165102" y3="-4.2252228" z3="-0.50885261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.3496526" y3="-4.52295493" z3="0.63325379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.72168758" y3="-0.23179191" z3="-1.3294574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.66164318" y3="0.52551836" z3="-0.04444399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.86434315" y3="-1.22166888" z3="-0.36845087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.9836252" y3="0.8048127" z3="0.12377578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.68059645" y3="0.24744869" z3="1.76349316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95229668" y3="1.46805473" z3="1.466016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.89417952" y3="-0.29962866" z3="3.11276766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.2634792" y3="-1.95809861" z3="2.56323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.65916634" y3="-1.58338639" z3="3.26262886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.24543002" y3="-3.88005278" z3="0.66248365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.76786604" y3="-4.39371949" z3="1.55903002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.65317644" y3="-5.57177587" z3="0.51570659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.38901784" y3="-2.1819097" z3="-0.08861911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1712193" y3="-3.22564133" z3="-0.99858182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4536735" y3="-4.35768525" z3="-0.63095337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96659078" y3="-4.44332024" z3="0.66820077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19903884" y3="-3.44400883" z3="1.60888733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90345626" y3="-2.31127208" z3="1.22100873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51881803" y3="-3.12299079" z3="-2.02976604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.2445209" y3="-5.15057564" z3="-1.34990914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.14807634" y3="-5.59633679" z3="1.05036404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.80032738" y3="-3.55042709" z3="2.61845994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.05878509" y3="-1.50319832" z3="1.93796399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.53115237" y3="3.96986029" z3="-0.33305573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.88128169" y3="3.66897894" z3="-0.45584367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30504691" y3="2.9542098" z3="-1.5712424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42650563" y3="2.59128247" z3="-2.5887425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08253383" y3="2.91321151" z3="-2.4576053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.17299097" y3="4.46925532" z3="0.57054998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.59739758" y3="3.9401951" z3="0.32004537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70076346" y3="2.51513989" z3="-1.64590717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.79535923" y3="2.04406448" z3="-3.45684272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.61660354" y3="2.61077637" z3="-3.23816691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.99390311" y3="-5.81690627" z3="2.23067379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.65541612" y3="-6.26183133" z3="0.15833775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.03687983" y3="1.84992611" z3="-2.60717247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44078975" y3="2.81888359" z3="-0.73042239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78664636" y3="0.19611881" z3="-1.85044028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08386296" y3="1.43242624" z3="-1.74795039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99419324" y3="0.13783606" z3="-2.59947891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47450048" y3="1.24615529" z3="-3.25181544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.5288395" y3="-0.81528684" z3="-2.65731643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40146955" y3="1.18870285" z3="-3.82910373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59033762" y3="2.55246958" z3="-2.46557578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75272478" y3="2.46226069" z3="-3.19329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04024953" y3="3.49509181" z3="-2.44250819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11919343" y3="3.33711603" z3="-3.73780222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56618219" y3="3.94534235" z3="-0.2719593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70811616" y3="5.08202477" z3="-0.19804952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88460937" y3="4.06424152" z3="0.25062421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.33834335" y3="5.25477548" z3="0.76577965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54028682" y3="3.19121329" z3="0.24692599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35498697" y3="5.31996498" z3="1.16366498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.21165198" y3="6.30430948" z3="0.32696405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.49971586" y3="6.39496148" z3="0.79304344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.54591783" y3="7.17215119" z3="0.36399665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.87478874" y3="7.33865178" z3="1.19878089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40550837" y3="-3.58798961" z3="-2.96362702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.6654416" y3="-4.6375974" z3="-2.75750757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23942426" y3="-3.13827733" z3="-3.53483898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.5171725" y3="-3.57073295" z3="-3.61436284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64175069" y3="-1.38842519" z3="-1.90382158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43332467" y3="-0.72615236" z3="-2.30351825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.24922753" y3="-0.9344728" z3="-0.98116244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82003419" y3="-1.3929822" z3="-2.63817848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0558,-.9398,-.5606;6.7708,-1.9214,-1.3778;6.2427,-.971,-1.253;4.8802,1.4865,-.9695;4.4028,.3178,-.4017;2.7284,2.6696,-1.2016;4.0604,2.7253,-.8299;2.3516,4.9644,-.5994;1.8402,3.777,-1.0672;1.6972,5.8364,-.5032;2.2191,1.4995,-1.6791;3.2259,.3467,.2886;1.8305,.3122,-.5967;.6999,.6685,.2952;1.8203,-.9519,-1.4291;1.0806,-2.4812,-1.308;1.8702,-5.2991,-6.3957;1.6247,-4.8982,-5.4081;.9786,-3.844,-2.8993;1.6178,-3.5233,-5.2071;1.3393,-5.7619,-4.3483;1.0307,-5.2288,-3.1022;1.3045,-2.9661,-3.9582;1.8494,-2.8281,-6.0178;1.3704,-6.8457,-4.4858;.8428,-5.8905,-2.2522;.595,-3.3371,-1.632;-.4373,-3.8075,-.9201;-.8234,-4.7761,-1.2502;-.4745,-3.5972,.5455;-.6226,-3.2896,3.3265;-.9378,-4.6445,1.3525;-.0889,-2.393,1.1451;-.1647,-2.2422,2.5268;-1.0046,-4.4944,2.7353;-1.2141,-5.5993,.8959;.2531,-1.5408,.5549;.1457,-1.2916,2.9696;-1.3369,-5.3313,3.3554;-.6697,-3.174,4.4133;1.2758,-1.6311,-3.8657;1.4862,-1.287,-2.9517;.3893,3.5752,-1.3136;-2.1493,-2.7937,-1.6993;-2.9707,-3.0427,-.5963;-3.0908,-2.2696,.4313;-3.7923,-.7584,.9313;-5.1282,-.3992,-.3192;-2.4825,.5489,1.0704;-4.4696,-1.1931,2.6196;-3.5617,-4.2252,-.5089;-4.3497,-4.523,.6333;-4.7217,-.2318,-1.3295;-5.6616,.5255,-.0444;-5.8643,-1.2217,-.3685;-1.9836,.8048,.1238;-1.6806,.2474,1.7635;-2.9523,1.4681,1.466;-4.8942,-.2996,3.1128;-5.2635,-1.9581,2.5632;-3.6592,-1.5834,3.2626;-5.2454,-3.8801,.6625;-3.7679,-4.3937,1.559;-4.6532,-5.5718,.5157;4.389,-2.1819,-.0886;4.1712,-3.2256,-.9986;3.4537,-4.3577,-.631;2.9666,-4.4433,.6682;3.199,-3.444,1.6089;3.9035,-2.3113,1.221;4.5188,-3.123,-2.0298;3.2445,-5.1506,-1.3499;2.1481,-5.5963,1.0504;2.8003,-3.5504,2.6185;4.0588,-1.5032,1.938;-.5312,3.9699,-.3331;-1.8813,3.669,-.4558;-2.305,2.9542,-1.5712;-1.4265,2.5913,-2.5887;-.0825,2.9132,-2.4576;-.173,4.4693,.5705;-2.5974,3.9402,.32;-3.7008,2.5151,-1.6459;-1.7954,2.0441,-3.4568;.6166,2.6108,-3.2382;1.9939,-5.8169,2.2307;1.6554,-6.2618,.1583;-4.0369,1.8499,-2.6072;-4.4408,2.8189,-.7304;6.7866,.1961,-1.8504;6.0839,1.4324,-1.748;7.9942,.1378,-2.5995;8.4745,1.2462,-3.2518;8.5288,-.8153,-2.6573;9.4015,1.1887,-3.8291;6.5903,2.5525,-2.4656;7.7527,2.4623,-3.1933;6.0402,3.4951,-2.4425;8.1192,3.3371,-3.7378;4.5662,3.9453,-.272;3.7081,5.082,-.198;5.8846,4.0642,.2506;6.3383,5.2548,.7658;6.5403,3.1912,.2469;7.355,5.32,1.1637;4.2117,6.3043,.327;5.4997,6.395,.793;3.5459,7.1722,.364;5.8748,7.3387,1.1988;-2.4055,-3.588,-2.9636;-2.6654,-4.6376,-2.7575;-3.2394,-3.1383,-3.5348;-1.5172,-3.5707,-3.6144;-1.6418,-1.3884,-1.9038;-2.4333,-.7262,-2.3035;-1.2492,-.9345,-.9812;-.82,-1.393,-2.6382;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661850399507</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006009122810 0.000495116515 0.025981844791 0.005338700267</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037663127 -0.001410205 0.000058236 0.000160926 0.000202429 0.000237485 0.000300161 0.000377345 0.000406573 0.000494904 0.000632845 0.000746315 0.000767312 0.000798122 0.000844988 0.000913388 0.000955072 0.001143262 0.001177930 0.001228051 0.001269095 0.001401558 0.001410882 0.001474688 0.001649976 0.001737160 0.001831520 0.002059334 0.002139475 0.002957330 0.003002663 0.003124283 0.003364144 0.003928474 0.004036770 0.004306866 0.004513436 0.004794119 0.005201429 0.005565733 0.005759466 0.005903503 0.006111698 0.006570412 0.006925854 0.007264899 0.007785814 0.007922083 0.008309545 0.009228176 0.009382316 0.010112202 0.010279178 0.012428998 0.012747473 0.013236557 0.014230047 0.014588877 0.014891051 0.015279574 0.015777033 0.016081661 0.016326959 0.016403242 0.017367632 0.018025496 0.018450720 0.020282847 0.021028116 0.022189964 0.022996627 0.023196147 0.024505364 0.025062698 0.025948376 0.026468552 0.026723814 0.027760638 0.028971598 0.029688082 0.030412253 0.030997525 0.031851034 0.032676806 0.033932173 0.037060348 0.037735851 0.038356343 0.039096831 0.040139483 0.040760893 0.043248507 0.045258294 0.046124055 0.047133022 0.048232259 0.049669429 0.050666348 0.051322321 0.051556901 0.051799819 0.052281418 0.052386749 0.052539784 0.053793437 0.054709119 0.056491813 0.056836720 0.056958667 0.057207848 0.057577026 0.058397014 0.059202402 0.059550715 0.060254624 0.060474524 0.061436853 0.061679224 0.064546865 0.064602404 0.065527266 0.067695138 0.067973466 0.069206970 0.071587045 0.072647173 0.076354481 0.076915064 0.080005435 0.080947560 0.082078636 0.086285835 0.089451025 0.090799871 0.092575415 0.092837555 0.094162513 0.095114367 0.095286169 0.095863360 0.096359419 0.096852521 0.097730865 0.098206668 0.099294295 0.099433655 0.100040328 0.101236490 0.101957318 0.102647152 0.103680399 0.104224979 0.105053413 0.106505841 0.107319738 0.107871524 0.108673188 0.110120950 0.112552300 0.113339202 0.116026941 0.116459662 0.117146771 0.119415374 0.122735680 0.125557697 0.127580392 0.128185287 0.131125473 0.133028221 0.135109004 0.136685787 0.141959033 0.144362970 0.145101147 0.145702914 0.146689985 0.147608961 0.152479658 0.157233969 0.159719190 0.169705518 0.173847995 0.174626723 0.180357347 0.183145913 0.184815835 0.185322674 0.188025430 0.189535281 0.200090195 0.201756929 0.203278853 0.204622258 0.206772883 0.207126416 0.208875967 0.209516675 0.212240346 0.215090748 0.216466273 0.224678382 0.231447863 0.232376672 0.232965638 0.234902341 0.243972282 0.248001733 0.254234288 0.254982719 0.256667478 0.258674411 0.271367166 0.276162219 0.289386476 0.295185852 0.297062617 0.299154098 0.303771621 0.305846800 0.307519399 0.310699084 0.320011746 0.321769954 0.324627440 0.327589636 0.344205434 0.346293786 0.346804267 0.350416711 0.354644484 0.358548495 0.359647809 0.363824189 0.369534202 0.380009991 0.404384579 0.424754730 0.430020505 0.444297683 0.462488079 0.462985259 0.473499016 0.474683717 0.477886300 0.479566974 0.498018335 0.505786204 0.540845998 0.560076156 0.566701486 0.569644571 0.583214605 0.599370137 0.604142834 0.633036352 0.642804936 0.665256816 0.670097723 0.674910343 0.681283167 0.686340108 0.690906873 0.691599245 0.704240346 0.704737023 0.713484407 0.737034633 0.750678844 0.771570068 0.775824091 0.797854938 0.804550530 0.811281744 0.814689783 0.816203014 0.819476262 0.820165491 0.827388617 0.829328597 0.830468870 0.835973683 0.840488130 0.842503246 0.844596794 0.848599023 0.856398758 0.859238449 0.867332499 0.871653505 0.874890545 0.886483272 0.887696491 0.893549216 0.914730658 0.923898577 0.930843561 0.933612279 0.958344299 0.969110288 0.975819971 0.989116645 0.999612161 1.012915196 1.034006315 1.042602563 1.049150848 1.055208119 1.072722629 1.084181008 1.088639849 1.109989545 1.110584476 1.116090316 1.122411226 1.123318266 1.133999868 1.142165338 1.161139436 1.168703860 1.172568784 1.173186547 1.200370213 1.203636603 1.214395215 1.240810590 1.247681294 1.291703139 1.295694867 1.314031293 1.326053510 1.326400597 1.330134448 1.332985349 1.334419795 1.340915273 1.345755714 1.362010090 1.377206072 1.378845608 1.380938265 1.381560487 1.557327281 1.661926493 1.671872238</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">16</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.05316396" y3="-0.93983781" z3="-0.56358683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.76820307" y3="-1.92203398" z3="-1.37996202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.24051006" y3="-0.97137546" z3="-1.25530244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87938857" y3="1.48676238" z3="-0.97134631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.40059918" y3="0.31803781" z3="-0.40471544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72871719" y3="2.67189637" z3="-1.20277187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06073674" y3="2.72610019" z3="-0.8307792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35324976" y3="4.96566972" z3="-0.5956596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84106537" y3="3.77938612" z3="-1.06549652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.69919062" y3="5.83767605" z3="-0.49725739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21898647" y3="1.50300427" z3="-1.68275302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22305422" y3="0.34725032" z3="0.28453821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.82839983" y3="0.31454938" z3="-0.60230387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69691615" y3="0.67092585" z3="0.28850808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.81860055" y3="-0.94891355" z3="-1.43555296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08047623" y3="-2.47937448" z3="-1.31078778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.86620826" y3="-5.30333362" z3="-6.39584496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62160966" y3="-4.90136417" z3="-5.40846116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97771197" y3="-3.84439004" z3="-2.90020494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.61373132" y3="-3.52619489" z3="-5.20926964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.3382354" y3="-5.76392117" z3="-4.34713475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0307369" y3="-5.22941759" z3="-3.10139401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30157663" y3="-2.96759519" z3="-3.96070388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84380283" y3="-2.83193801" z3="-6.02125595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37001783" y3="-6.84790086" z3="-4.48327873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84437014" y3="-5.89014227" z3="-2.25031941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59515742" y3="-3.3360983" z3="-1.63310881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.43506133" y3="-3.80702128" z3="-0.91879189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.82061124" y3="-4.7765497" z3="-1.24702095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.47094396" y3="-3.59398024" z3="0.54629731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.61393945" y3="-3.28244858" z3="3.32713644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.92956651" y3="-4.64132968" z3="1.35589591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08784873" y3="-2.38755063" z3="1.1431117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16093802" y3="-2.23491791" z3="2.52475348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.99376381" y3="-4.48917501" z3="2.73867565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.20387217" y3="-5.59768666" z3="0.90146893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.25015537" y3="-1.5350807" z3="0.55093292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1477539" y3="-1.28268829" z3="2.96523969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.32225947" y3="-5.32613286" z3="3.36077133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.65904682" y3="-3.16521356" z3="4.4137991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27181391" y3="-1.63246867" z3="-3.87015801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48287808" y3="-1.28676728" z3="-2.95692282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38980415" y3="3.57829273" z3="-1.31033213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1508972" y3="-2.79673616" z3="-1.6983044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.97024621" y3="-3.04462278" z3="-0.59357449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09352365" y3="-2.26779739" z3="0.43093551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79830323" y3="-0.7567937" z3="0.92545936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.12715087" y3="-0.40067364" z3="-0.33356365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48712733" y3="0.54870906" z3="1.07321315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.48439441" y3="-1.18952457" z3="2.60923096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.55652836" y3="-4.22945633" z3="-0.50149433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.34227182" y3="-4.52660497" z3="0.64220262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.70825106" y3="-0.23994218" z3="-1.34340692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.66590298" y3="0.5278745" z3="-0.07042583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.86240071" y3="-1.22370992" z3="-0.3870193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.96651589" y3="0.79755504" z3="0.13322149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.6993381" y3="0.24835954" z3="1.78723142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96336416" y3="1.4719576" z3="1.45384389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.9081181" y3="-0.29575549" z3="3.09973449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.27925036" y3="-1.95312771" z3="2.55021921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.67795657" y3="-1.58056107" z3="3.25359304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.24019419" y3="-3.88659703" z3="0.67064959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.75986586" y3="-4.39292006" z3="1.56700352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.64244899" y3="-5.57683795" z3="0.52794371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.38635191" y3="-2.18186342" z3="-0.09158413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16952653" y3="-3.22614236" z3="-1.00115079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45362841" y3="-4.35901287" z3="-0.63285662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96724691" y3="-4.44490141" z3="0.6665456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19829933" y3="-3.44476634" z3="1.60669138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.9009543" y3="-2.31116804" z3="1.21811643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51689622" y3="-3.12349891" z3="-2.03241322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24544219" y3="-5.15251492" z3="-1.35142093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.15108273" y3="-5.5992395" z3="1.04959231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79999351" y3="-3.55130588" z3="2.61641901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.0553315" y3="-1.50254016" z3="1.93465723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52900922" y3="3.97058213" z3="-0.32734894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87944166" y3="3.6702873" z3="-0.44877986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30501403" y3="2.95799653" z3="-1.56507087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42805546" y3="2.59698885" z3="-2.58452334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08393831" y3="2.91890929" z3="-2.45510011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.16920085" y3="4.46744861" z3="0.57705272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.59412395" y3="3.93974788" z3="0.32905097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70052989" y3="2.51849244" z3="-1.63824564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.79837595" y3="2.05143683" z3="-3.45303258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.61388566" y3="2.61829993" z3="-3.23751149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="1.999788" y3="-5.82096674" z3="2.23007323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.65730996" y3="-6.26464017" z3="0.15807261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.03307936" y3="1.84335211" z3="-2.58839046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44347954" y3="2.8306735" z3="-0.731484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78551112" y3="0.19562701" z3="-1.85188865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08352359" y3="1.43233708" z3="-1.74903345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99347685" y3="0.13697856" z3="-2.60023698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47496751" y3="1.24540096" z3="-3.25152631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52749723" y3="-0.81647716" z3="-2.65838956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40223933" y3="1.18768115" z3="-3.82830617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5912834" y3="2.55254651" z3="-2.46550236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75405617" y3="2.46200564" z3="-3.19256077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0418842" y3="3.49556585" z3="-2.44204943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12152652" y3="3.33698113" z3="-3.73620796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56735974" y3="3.94486256" z3="-0.27075136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.70995261" y3="5.08189356" z3="-0.19466997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88591958" y3="4.06207484" z3="0.25191678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34036962" y3="5.25140289" z3="0.76922376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54117211" y3="3.18873715" z3="0.24645536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35709258" y3="5.31529216" z3="1.16712586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.21423727" y3="6.30293869" z3="0.33251541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.50238583" y3="6.39200765" z3="0.79866674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.54899509" y3="7.17108283" z3="0.37121881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.87802089" y3="7.33472884" z3="1.20613627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40680582" y3="-3.59492465" z3="-2.96032607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66402461" y3="-4.64468531" z3="-2.75142267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24249872" y3="-3.14847965" z3="-3.53161835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51937717" y3="-3.57719468" z3="-3.61229934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64508248" y3="-1.39158022" z3="-1.90679503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43684234" y3="-0.7313783" z3="-2.30945708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.25431281" y3="-0.93456952" z3="-0.98499797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82227316" y3="-1.39734725" z3="-2.63996176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0532,-.9398,-.5636;6.7682,-1.922,-1.38;6.2405,-.9714,-1.2553;4.8794,1.4868,-.9713;4.4006,.318,-.4047;2.7287,2.6719,-1.2028;4.0607,2.7261,-.8308;2.3532,4.9657,-.5957;1.8411,3.7794,-1.0655;1.6992,5.8377,-.4973;2.219,1.503,-1.6828;3.2231,.3473,.2845;1.8284,.3145,-.6023;.6969,.6709,.2885;1.8186,-.9489,-1.4356;1.0805,-2.4794,-1.3108;1.8662,-5.3033,-6.3958;1.6216,-4.9014,-5.4085;.9777,-3.8444,-2.9002;1.6137,-3.5262,-5.2093;1.3382,-5.7639,-4.3471;1.0307,-5.2294,-3.1014;1.3016,-2.9676,-3.9607;1.8438,-2.8319,-6.0213;1.37,-6.8479,-4.4833;.8444,-5.8901,-2.2503;.5952,-3.3361,-1.6331;-.4351,-3.807,-.9188;-.8206,-4.7765,-1.247;-.4709,-3.594,.5463;-.6139,-3.2824,3.3271;-.9296,-4.6413,1.3559;-.0878,-2.3876,1.1431;-.1609,-2.2349,2.5248;-.9938,-4.4892,2.7387;-1.2039,-5.5977,.9015;.2502,-1.5351,.5509;.1478,-1.2827,2.9652;-1.3223,-5.3261,3.3608;-.659,-3.1652,4.4138;1.2718,-1.6325,-3.8702;1.4829,-1.2868,-2.9569;.3898,3.5783,-1.3103;-2.1509,-2.7967,-1.6983;-2.9702,-3.0446,-.5936;-3.0935,-2.2678,.4309;-3.7983,-.7568,.9255;-5.1272,-.4007,-.3336;-2.4871,.5487,1.0732;-4.4844,-1.1895,2.6092;-3.5565,-4.2295,-.5015;-4.3423,-4.5266,.6422;-4.7083,-.2399,-1.3434;-5.6659,.5279,-.0704;-5.8624,-1.2237,-.387;-1.9665,.7976,.1332;-1.6993,.2484,1.7872;-2.9634,1.472,1.4538;-4.9081,-.2958,3.0997;-5.2793,-1.9531,2.5502;-3.678,-1.5806,3.2536;-5.2402,-3.8866,.6706;-3.7599,-4.3929,1.567;-4.6424,-5.5768,.5279;4.3864,-2.1819,-.0916;4.1695,-3.2261,-1.0012;3.4536,-4.359,-.6329;2.9672,-4.4449,.6665;3.1983,-3.4448,1.6067;3.901,-2.3112,1.2181;4.5169,-3.1235,-2.0324;3.2454,-5.1525,-1.3514;2.1511,-5.5992,1.0496;2.8,-3.5513,2.6164;4.0553,-1.5025,1.9347;-.529,3.9706,-.3273;-1.8794,3.6703,-.4488;-2.305,2.958,-1.5651;-1.4281,2.597,-2.5845;-.0839,2.9189,-2.4551;-.1692,4.4674,.5771;-2.5941,3.9397,.3291;-3.7005,2.5185,-1.6382;-1.7984,2.0514,-3.453;.6139,2.6183,-3.2375;1.9998,-5.821,2.2301;1.6573,-6.2646,.1581;-4.0331,1.8434,-2.5884;-4.4435,2.8307,-.7315;6.7855,.1956,-1.8519;6.0835,1.4323,-1.749;7.9935,.137,-2.6002;8.475,1.2454,-3.2515;8.5275,-.8165,-2.6584;9.4022,1.1877,-3.8283;6.5913,2.5525,-2.4655;7.7541,2.462,-3.1926;6.0419,3.4956,-2.442;8.1215,3.337,-3.7362;4.5674,3.9449,-.2708;3.71,5.0819,-.1947;5.8859,4.0621,.2519;6.3404,5.2514,.7692;6.5412,3.1887,.2465;7.3571,5.3153,1.1671;4.2142,6.3029,.3325;5.5024,6.392,.7987;3.549,7.1711,.3712;5.878,7.3347,1.2061;-2.4068,-3.5949,-2.9603;-2.664,-4.6447,-2.7514;-3.2425,-3.1485,-3.5316;-1.5194,-3.5772,-3.6123;-1.6451,-1.3916,-1.9068;-2.4368,-.7314,-2.3095;-1.2543,-.9346,-.985;-.8223,-1.3973,-2.64;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661854539196</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007114204717 0.000597994716 0.027917529048 0.005339001104</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037665219 -0.001760548 0.000063863 0.000160919 0.000202675 0.000238145 0.000305285 0.000377366 0.000409508 0.000494876 0.000632881 0.000749613 0.000767169 0.000811449 0.000863807 0.000913047 0.000967702 0.001143950 0.001179233 0.001228267 0.001270553 0.001402697 0.001411664 0.001475509 0.001657532 0.001740965 0.001852247 0.002081651 0.002172385 0.002989476 0.003058419 0.003128740 0.003368717 0.003934663 0.004042040 0.004307323 0.004554672 0.004795006 0.005483746 0.005573424 0.005898780 0.006094383 0.006568192 0.006571862 0.006924994 0.007266349 0.007860843 0.007991202 0.008462658 0.009233283 0.009423207 0.010112077 0.010281245 0.012429916 0.012747707 0.013245286 0.014230041 0.014588844 0.014895579 0.015279524 0.015777045 0.016080832 0.016349009 0.016409359 0.017382784 0.018026150 0.018463340 0.020283515 0.021028196 0.022190147 0.022996669 0.023197712 0.024505869 0.025095373 0.025948355 0.026469227 0.026724705 0.027760634 0.029051285 0.029689983 0.030412246 0.030998040 0.031851219 0.032677232 0.033937962 0.037061242 0.037754619 0.038357833 0.039098911 0.040143093 0.040760737 0.043246665 0.045258276 0.046124319 0.047146316 0.048402999 0.049669428 0.050666514 0.051322520 0.051556918 0.051799813 0.052281419 0.052386754 0.052539799 0.053793505 0.054709120 0.056491823 0.056836728 0.056958639 0.057208580 0.057577219 0.058397404 0.059202467 0.059552803 0.060254604 0.060474768 0.061436835 0.061679262 0.064547061 0.064602649 0.065527241 0.067695274 0.067973532 0.069207347 0.071587927 0.072647194 0.076355238 0.076917526 0.080005537 0.080949101 0.082078769 0.086287320 0.089451052 0.090800055 0.092576344 0.092837579 0.094163063 0.095114754 0.095286167 0.095865425 0.096359476 0.096852521 0.097731265 0.098205495 0.099328162 0.099434330 0.100038190 0.101236777 0.101958665 0.102647048 0.103681894 0.104227719 0.105106971 0.106506092 0.107321031 0.107871811 0.108673414 0.110121342 0.112552504 0.113339206 0.116028046 0.116459953 0.117146928 0.119415479 0.122740329 0.125566532 0.127580642 0.128188982 0.131129699 0.133028524 0.135109292 0.136685734 0.141959167 0.144367547 0.145134066 0.145703219 0.146690186 0.147614499 0.152479685 0.157234017 0.159721057 0.169706309 0.173849113 0.174627007 0.180357349 0.183145900 0.184841339 0.185329516 0.188025958 0.189543772 0.200133982 0.201757836 0.203282433 0.204622251 0.206772931 0.207126445 0.208876714 0.209517958 0.212240451 0.215090749 0.216466370 0.224678705 0.231447936 0.232377146 0.232965977 0.234902351 0.243973704 0.248001721 0.254234588 0.254982867 0.256667558 0.258677202 0.271367162 0.276163079 0.289386770 0.295187224 0.297063890 0.299163524 0.303782749 0.305846955 0.307519408 0.310699311 0.320014168 0.321770432 0.324627438 0.327594759 0.344241077 0.346294532 0.346822219 0.350417930 0.354645343 0.358610697 0.359976137 0.363830051 0.369737648 0.380085882 0.404429416 0.424768251 0.430024265 0.444297814 0.462551046 0.462985312 0.473640871 0.474713721 0.477886449 0.479678916 0.498018384 0.505949022 0.540909824 0.560359951 0.566703993 0.569821085 0.583214991 0.599625001 0.604149543 0.633044932 0.642829955 0.665258546 0.670147090 0.675112616 0.681283171 0.686418531 0.690931621 0.691601514 0.704240359 0.704738028 0.713508846 0.737041603 0.750678869 0.771570128 0.775824553 0.797854931 0.804686527 0.811476883 0.814719670 0.816226641 0.819476528 0.820202176 0.827599355 0.829329147 0.830495312 0.835972977 0.840488220 0.842563091 0.844596771 0.848599438 0.856398764 0.859238437 0.867332702 0.871669214 0.874890948 0.886483670 0.887696493 0.893556744 0.914732361 0.923898927 0.930844159 0.933612701 0.958344380 0.969111431 0.975820470 0.989116921 0.999612176 1.012915200 1.034007023 1.042602601 1.049150950 1.055208181 1.072725722 1.084181099 1.088639927 1.109989567 1.110584499 1.116090542 1.122411251 1.123318264 1.133999889 1.142165866 1.161139537 1.168703935 1.172568862 1.173186783 1.200370678 1.203641572 1.214436003 1.243726074 1.247978029 1.291709321 1.295696155 1.314037965 1.326064151 1.326405763 1.330135062 1.333407704 1.334423035 1.340915868 1.345755780 1.362010043 1.377217846 1.378846222 1.380938307 1.381561081 1.557327416 1.662113220 1.671873252</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">17</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.05007117" y3="-0.93986348" z3="-0.56623393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.7651469" y3="-1.92282298" z3="-1.38161286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.23786009" y3="-0.97190974" z3="-1.25719415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87829495" y3="1.48698199" z3="-0.97309608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39810415" y3="0.31830699" z3="-0.40751004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72892694" y3="2.67440205" z3="-1.20393969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06088897" y3="2.72699643" z3="-0.83164156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35485051" y3="4.9671456" z3="-0.59209673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84189889" y3="3.78201797" z3="-1.06397102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70117078" y3="5.839188" z3="-0.49152252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21857788" y3="1.50669769" z3="-1.68634103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21986158" y3="0.34793113" z3="0.28061367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.82622357" y3="0.31712915" z3="-0.60791267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69387677" y3="0.67350563" z3="0.28189845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.81649599" y3="-0.94566885" z3="-1.44208157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07977359" y3="-2.47703302" z3="-1.3139436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.8633329" y3="-5.30812426" z3="-6.39529586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61928223" y3="-4.9048864" z3="-5.40830237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97674102" y3="-3.84468867" z3="-2.9010223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.61025202" y3="-3.52942766" z3="-5.21117848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.3377046" y3="-5.7660791" z3="-4.34541434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03085965" y3="-5.22997746" z3="-3.10021006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2987144" y3="-2.96923737" z3="-3.96318676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8388746" y3="-2.83617389" z3="-6.02441218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37039337" y3="-6.85023715" z3="-4.47993756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84589366" y3="-5.88963364" z3="-2.24801903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59503487" y3="-3.33478206" z3="-1.63434072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.43408028" y3="-3.80554239" z3="-0.91816176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.81829792" y3="-4.77642675" z3="-1.24382957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.46790805" y3="-3.59027438" z3="0.54678599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.60574596" y3="-3.27474938" z3="3.32744543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.92180038" y3="-4.6376292" z3="1.35900281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08740935" y3="-2.38168642" z3="1.14085707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15777843" y3="-2.22707325" z3="2.52238575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.98336908" y3="-4.48348652" z3="2.7417172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.19430016" y3="-5.59552932" z3="0.90674022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.24641428" y3="-1.52896737" z3="0.5466607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14906401" y3="-1.27318412" z3="2.96056283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.30804568" y3="-5.32043924" z3="3.3658156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.64863233" y3="-3.15602016" z3="4.41403913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26761452" y3="-1.6339859" z3="-3.87469099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47944675" y3="-1.28655844" z3="-2.9623071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.39034594" y3="3.58162404" z3="-1.3072436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15153375" y3="-2.80031031" z3="-1.69711359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96891137" y3="-3.04748788" z3="-0.59049121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09147141" y3="-2.26957361" z3="0.43334062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79972865" y3="-0.75809266" z3="0.92197545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.11919589" y3="-0.40483281" z3="-0.34929865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49011357" y3="0.54769512" z3="1.07686052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.49940667" y3="-1.1881163" z3="2.60152389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.55281425" y3="-4.23291647" z3="-0.49563515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.3356289" y3="-4.52990627" z3="0.6502312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.69491746" y3="-0.2547154" z3="-1.35806417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.65562856" y3="0.52879635" z3="-0.09834336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.85723654" y3="-1.22552734" z3="-0.39882349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.97088491" y3="0.79312015" z3="0.14059162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.70653175" y3="0.25148231" z3="1.78994807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96771635" y3="1.47223328" z3="1.45023585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.92702897" y3="-0.29185932" z3="3.08625332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.29524684" y3="-1.95045061" z3="2.53765198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.6985394" y3="-1.57873638" z3="3.25574037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.23565744" y3="-3.89287528" z3="0.67849826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.75210599" y3="-4.39185843" z3="1.57368095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.63235708" y3="-5.58142431" z3="0.5390988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.38314167" y3="-2.18176125" z3="-0.09409303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16738503" y3="-3.22673586" z3="-1.0031157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45308505" y3="-4.36036521" z3="-0.63406477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96726723" y3="-4.44630516" z3="0.66553661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19681543" y3="-3.44519984" z3="1.60500791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.89774926" y3="-2.31080584" z3="1.2156447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51464478" y3="-3.124283" z3="-2.0344313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24595821" y3="-5.1545953" z3="-1.35213215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.15342776" y3="-5.60190244" z3="1.04956004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79881368" y3="-3.55170101" z3="2.61486404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.05107935" y3="-1.50151891" z3="1.93166966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52675132" y3="3.97131932" z3="-0.3216199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87713713" y3="3.67038917" z3="-0.44097369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30454324" y3="2.96094641" z3="-1.55838098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.42951539" y3="2.60342916" z3="-2.58083143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08516573" y3="2.92495706" z3="-2.45277715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.16551167" y3="4.46652155" z3="0.58306893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.59060798" y3="3.93814683" z3="0.33850758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70077262" y3="2.52334925" z3="-1.63166364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.80148595" y3="2.06062698" z3="-3.45040617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.61146752" y3="2.62631464" z3="-3.2370285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.00481748" y3="-5.82452424" z3="2.23019244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.65870096" y3="-6.26741777" z3="0.15865634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.04239191" y3="1.87075743" z3="-2.60051019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4361664" y3="2.81649405" z3="-0.70804824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78400822" y3="0.19491314" z3="-1.85304859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08288739" y3="1.43207674" z3="-1.74998712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99244645" y3="0.13578395" z3="-2.60059607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47523032" y3="1.24423852" z3="-3.25086984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52580015" y3="-0.81803309" z3="-2.65892168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40287165" y3="1.18616713" z3="-3.82701996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59199778" y3="2.55235752" z3="-2.46538085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75522099" y3="2.46137282" z3="-3.19165835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04329829" y3="3.49578307" z3="-2.44168728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1237789" y3="3.33640436" z3="-3.7344769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56842583" y3="3.94447765" z3="-0.26964952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71176969" y3="5.08192967" z3="-0.1914855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88713828" y3="4.05996676" z3="0.25301078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34242094" y3="5.24812117" z3="0.77226736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54188245" y3="3.18626231" z3="0.24582748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.35925629" y3="5.31068241" z3="1.17008681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.21689978" y3="6.30175554" z3="0.33768899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.50517096" y3="6.38920787" z3="0.80379394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.55219467" y3="7.17023778" z3="0.37797575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.88146595" y3="7.33098987" z3="1.21281267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40794958" y3="-3.60149986" z3="-2.95712574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66266741" y3="-4.65133385" z3="-2.74567316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24539996" y3="-3.15804082" z3="-3.52810032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52151124" y3="-3.58334213" z3="-3.61042452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64888926" y3="-1.39455959" z3="-1.90992855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44168008" y3="-0.73791131" z3="-2.31635347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.26046922" y3="-0.93295931" z3="-0.98937191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82520723" y3="-1.40098971" z3="-2.64211115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0501,-.9399,-.5662;6.7651,-1.9228,-1.3816;6.2379,-.9719,-1.2572;4.8783,1.487,-.9731;4.3981,.3183,-.4075;2.7289,2.6744,-1.2039;4.0609,2.727,-.8316;2.3549,4.9671,-.5921;1.8419,3.782,-1.064;1.7012,5.8392,-.4915;2.2186,1.5067,-1.6863;3.2199,.3479,.2806;1.8262,.3171,-.6079;.6939,.6735,.2819;1.8165,-.9457,-1.4421;1.0798,-2.477,-1.3139;1.8633,-5.3081,-6.3953;1.6193,-4.9049,-5.4083;.9767,-3.8447,-2.901;1.6103,-3.5294,-5.2112;1.3377,-5.7661,-4.3454;1.0309,-5.23,-3.1002;1.2987,-2.9692,-3.9632;1.8389,-2.8362,-6.0244;1.3704,-6.8502,-4.4799;.8459,-5.8896,-2.248;.595,-3.3348,-1.6343;-.4341,-3.8055,-.9182;-.8183,-4.7764,-1.2438;-.4679,-3.5903,.5468;-.6057,-3.2747,3.3274;-.9218,-4.6376,1.359;-.0874,-2.3817,1.1409;-.1578,-2.2271,2.5224;-.9834,-4.4835,2.7417;-1.1943,-5.5955,.9067;.2464,-1.529,.5467;.1491,-1.2732,2.9606;-1.308,-5.3204,3.3658;-.6486,-3.156,4.414;1.2676,-1.634,-3.8747;1.4794,-1.2866,-2.9623;.3903,3.5816,-1.3072;-2.1515,-2.8003,-1.6971;-2.9689,-3.0475,-.5905;-3.0915,-2.2696,.4333;-3.7997,-.7581,.922;-5.1192,-.4048,-.3493;-2.4901,.5477,1.0769;-4.4994,-1.1881,2.6015;-3.5528,-4.2329,-.4956;-4.3356,-4.5299,.6502;-4.6949,-.2547,-1.3581;-5.6556,.5288,-.0983;-5.8572,-1.2255,-.3988;-1.9709,.7931,.1406;-1.7065,.2515,1.7899;-2.9677,1.4722,1.4502;-4.927,-.2919,3.0863;-5.2952,-1.9505,2.5377;-3.6985,-1.5787,3.2557;-5.2357,-3.8929,.6785;-3.7521,-4.3919,1.5737;-4.6324,-5.5814,.5391;4.3831,-2.1818,-.0941;4.1674,-3.2267,-1.0031;3.4531,-4.3604,-.6341;2.9673,-4.4463,.6655;3.1968,-3.4452,1.605;3.8977,-2.3108,1.2156;4.5146,-3.1243,-2.0344;3.246,-5.1546,-1.3521;2.1534,-5.6019,1.0496;2.7988,-3.5517,2.6149;4.0511,-1.5015,1.9317;-.5268,3.9713,-.3216;-1.8771,3.6704,-.441;-2.3045,2.9609,-1.5584;-1.4295,2.6034,-2.5808;-.0852,2.925,-2.4528;-.1655,4.4665,.5831;-2.5906,3.9381,.3385;-3.7008,2.5233,-1.6317;-1.8015,2.0606,-3.4504;.6115,2.6263,-3.237;2.0048,-5.8245,2.2302;1.6587,-6.2674,.1587;-4.0424,1.8708,-2.6005;-4.4362,2.8165,-.708;6.784,.1949,-1.853;6.0829,1.4321,-1.75;7.9924,.1358,-2.6006;8.4752,1.2442,-3.2509;8.5258,-.818,-2.6589;9.4029,1.1862,-3.827;6.592,2.5524,-2.4654;7.7552,2.4614,-3.1917;6.0433,3.4958,-2.4417;8.1238,3.3364,-3.7345;4.5684,3.9445,-.2696;3.7118,5.0819,-.1915;5.8871,4.06,.253;6.3424,5.2481,.7723;6.5419,3.1863,.2458;7.3593,5.3107,1.1701;4.2169,6.3018,.3377;5.5052,6.3892,.8038;3.5522,7.1702,.378;5.8815,7.331,1.2128;-2.4079,-3.6015,-2.9571;-2.6627,-4.6513,-2.7457;-3.2454,-3.158,-3.5281;-1.5215,-3.5833,-3.6104;-1.6489,-1.3946,-1.9099;-2.4417,-.7379,-2.3164;-1.2605,-.933,-.9894;-.8252,-1.401,-2.6421;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661862169491</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007438654692 0.000688485524 0.025705562345 0.005337593376</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037665393 -0.002316198 0.000066425 0.000161295 0.000202678 0.000238355 0.000310966 0.000377518 0.000410004 0.000494930 0.000633060 0.000749755 0.000767141 0.000816655 0.000870368 0.000917935 0.000968122 0.001149619 0.001179436 0.001228322 0.001270676 0.001407547 0.001411742 0.001478208 0.001673126 0.001743465 0.001876577 0.002110605 0.002213019 0.002993620 0.003102236 0.003194954 0.003374756 0.003949718 0.004043203 0.004317465 0.004556007 0.004797982 0.005526730 0.005592031 0.005898524 0.006113676 0.006569256 0.006923392 0.007264278 0.007481275 0.007910515 0.008145273 0.008988260 0.009279405 0.009555018 0.010119302 0.010287978 0.012430803 0.012748319 0.013249934 0.014230623 0.014589863 0.014906889 0.015283290 0.015778464 0.016102985 0.016362793 0.016409070 0.017383639 0.018044033 0.018462087 0.020285542 0.021029123 0.022192895 0.022996909 0.023200281 0.024506169 0.025091197 0.025948625 0.026469253 0.026724611 0.027760660 0.029164844 0.029692133 0.030412251 0.031000435 0.031851404 0.032677623 0.033961614 0.037076670 0.037768775 0.038359327 0.039098432 0.040146663 0.040763588 0.043263853 0.045258422 0.046124449 0.047144603 0.048526337 0.049669427 0.050666521 0.051322894 0.051556981 0.051799815 0.052281422 0.052386757 0.052539791 0.053793742 0.054709137 0.056491817 0.056836769 0.056958792 0.057208611 0.057577257 0.058397685 0.059202568 0.059554478 0.060255790 0.060474762 0.061436868 0.061679271 0.064547446 0.064603631 0.065527260 0.067695472 0.067974157 0.069207480 0.071589065 0.072647254 0.076356665 0.076921354 0.080005490 0.080951236 0.082079054 0.086290201 0.089451101 0.090800301 0.092578250 0.092837691 0.094164583 0.095116127 0.095286265 0.095868974 0.096359674 0.096852649 0.097732383 0.098223762 0.099383688 0.099441103 0.100077815 0.101236945 0.101960598 0.102648723 0.103687651 0.104233424 0.105155546 0.106506226 0.107322954 0.107872336 0.108673489 0.110121553 0.112552553 0.113339265 0.116028311 0.116460041 0.117147121 0.119415869 0.122745342 0.125575910 0.127580826 0.128193217 0.131140726 0.133028755 0.135109687 0.136685977 0.141959307 0.144375339 0.145211144 0.145703108 0.146690012 0.147618513 0.152479611 0.157234163 0.159722127 0.169707685 0.173849892 0.174627800 0.180357513 0.183145896 0.184857565 0.185331381 0.188026072 0.189549600 0.200144175 0.201757937 0.203288305 0.204622262 0.206772963 0.207126483 0.208877644 0.209519723 0.212240685 0.215090804 0.216466846 0.224679148 0.231448089 0.232377922 0.232966584 0.234902415 0.243975815 0.248001888 0.254235026 0.254983150 0.256667619 0.258680605 0.271367157 0.276165292 0.289387108 0.295190668 0.297069030 0.299178818 0.303799097 0.305847017 0.307519411 0.310703646 0.320016838 0.321770800 0.324628614 0.327604239 0.344329302 0.346307014 0.346866311 0.350422562 0.354649346 0.358610374 0.359956179 0.363835035 0.370411799 0.380151686 0.404481589 0.424770107 0.430027379 0.444297832 0.462622347 0.462985512 0.473821058 0.474727306 0.477886531 0.479822801 0.498018557 0.506146058 0.540991122 0.560712576 0.566707414 0.570057999 0.583215007 0.599690645 0.604156293 0.633045127 0.642861273 0.665259468 0.670204257 0.675139223 0.681283435 0.686844902 0.691026960 0.691610648 0.704240370 0.704739747 0.713539939 0.737051281 0.750678899 0.771570182 0.775825119 0.797855155 0.804704967 0.811477144 0.814800846 0.816269773 0.819480291 0.820256068 0.828188012 0.829335089 0.830551228 0.836106310 0.840488537 0.842605267 0.844601121 0.848600037 0.856401348 0.859238914 0.867332991 0.871689898 0.874891356 0.886484255 0.887696475 0.893567180 0.914732885 0.923899337 0.930844286 0.933612725 0.958344379 0.969112722 0.975820971 0.989117305 0.999612197 1.012915209 1.034007940 1.042602640 1.049150963 1.055208214 1.072728362 1.084181201 1.088640001 1.109989602 1.110584510 1.116090715 1.122411269 1.123318263 1.133999890 1.142166154 1.161139595 1.168704040 1.172568939 1.173187080 1.200371187 1.203647019 1.214469899 1.246263508 1.249635929 1.291723291 1.295698136 1.314047037 1.326076545 1.326413265 1.330135488 1.334000599 1.334433369 1.340916828 1.345755748 1.362010066 1.377234450 1.378846771 1.380938377 1.381562046 1.557327803 1.662369067 1.671874095</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">18</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.04676494" y3="-0.93992667" z3="-0.56893404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.76183988" y3="-1.92369185" z3="-1.38337158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.23499847" y3="-0.97250605" z3="-1.25914186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87708698" y3="1.48719811" z3="-0.97479927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39542613" y3="0.3185604" z3="-0.41031459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72905831" y3="2.67701601" z3="-1.20501724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06097646" y3="2.72793186" z3="-0.83238951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35642358" y3="4.96867325" z3="-0.58826939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84263334" y3="3.78474777" z3="-1.06225733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70318792" y3="5.84079304" z3="-0.48547998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21809645" y3="1.51059606" z3="-1.68996522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21651776" y3="0.34862205" z3="0.27665891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.82372958" y3="0.31997533" z3="-0.61342785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69068849" y3="0.67667689" z3="0.2754294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.81399705" y3="-0.94210588" z3="-1.4486455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07890048" y3="-2.47439726" z3="-1.31749069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.86018581" y3="-5.3123086" z3="-6.39537117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61669496" y3="-4.90788012" z3="-5.40872549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97579776" y3="-3.8447189" z3="-2.90226446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6064384" y3="-3.53214581" z3="-5.21357804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33704627" y3="-5.76781594" z3="-4.34430912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03099305" y3="-5.23023085" z3="-3.09955184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29562348" y3="-2.97047206" z3="-3.96606691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83349701" y3="-2.83983339" z3="-6.02805325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37063582" y3="-6.85213442" z3="-4.47727761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84751998" y3="-5.88887825" z3="-2.24625157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59512414" y3="-3.33340976" z3="-1.63588569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.43243521" y3="-3.80468953" z3="-0.91751584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.81506815" y3="-4.77701532" z3="-1.24071138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.46408088" y3="-3.5870798" z3="0.54720099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.59749837" y3="-3.26724434" z3="3.3275745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.91341254" y3="-4.63434535" z3="1.36199712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08632592" y3="-2.37627101" z3="1.13847867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15439544" y3="-2.21953614" z3="2.519854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.97266757" y3="-4.47807846" z3="2.74460149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.18405083" y3="-5.59379365" z3="0.91187768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.24334022" y3="-1.52333602" z3="0.54230241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1504414" y3="-1.26392965" z3="2.95573217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.29359835" y3="-5.31498334" z3="3.37068804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.63856831" y3="-3.14683004" z3="4.41405149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26307128" y3="-1.63511104" z3="-3.87949272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47564933" y3="-1.28597259" z3="-2.96794887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3907239" y3="3.58526126" z3="-1.30427193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15174813" y3="-2.80476003" z3="-1.69588444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96653584" y3="-3.05190744" z3="-0.58725996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08790651" y3="-2.2731534" z3="0.4363125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80137095" y3="-0.75956032" z3="0.91378465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.11315443" y3="-0.40928772" z3="-0.36374843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.4934052" y3="0.54699746" z3="1.0780012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.51517038" y3="-1.18359491" z3="2.59033121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.5484881" y3="-4.23795512" z3="-0.48969964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.32875057" y3="-4.53434522" z3="0.65813526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.68865295" y3="-0.25796214" z3="-1.36917148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.64519414" y3="0.52192928" z3="-0.1101592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.85279874" y3="-1.22852099" z3="-0.41406213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.94811469" y3="0.78628789" z3="0.14867959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.72398912" y3="0.2526827" z3="1.81565363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9782801" y3="1.47346928" z3="1.43914056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.94926437" y3="-0.28650104" z3="3.06874996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.30917136" y3="-1.94755636" z3="2.52135383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.71988741" y3="-1.57093894" z3="3.25365648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.23005858" y3="-3.89926051" z3="0.68662861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.7440489" y3="-4.39302809" z3="1.58022699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.62330778" y3="-5.58662774" z3="0.54957684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37966416" y3="-2.18169777" z3="-0.09670378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16495462" y3="-3.22732069" z3="-1.00522933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45229844" y3="-4.36174656" z3="-0.63545023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96710127" y3="-4.44783891" z3="0.66436705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19509975" y3="-3.44578058" z3="1.60319036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.89426567" y3="-2.31054926" z3="1.21306971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51207175" y3="-3.1250058" z3="-2.03660638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24621937" y3="-5.15666646" z3="-1.35305332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.15575321" y3="-5.60482155" z3="1.04934897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79737838" y3="-3.55228159" z3="2.61316714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.04652652" y3="-1.50063535" z3="1.92861722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52484661" y3="3.97221199" z3="-0.31619063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87553489" y3="3.67210678" z3="-0.43465227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30473822" y3="2.96617115" z3="-1.55361065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.43108064" y3="2.61064965" z3="-2.57782835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08648666" y3="2.93160743" z3="-2.45083665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.16213159" y3="4.46456609" z3="0.58952414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.58769507" y3="3.93764902" z3="0.34684361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70109005" y3="2.52917516" z3="-1.62584584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.80439543" y3="2.07011983" z3="-3.44821078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.60911749" y3="2.63481858" z3="-3.23671031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.0098303" y3="-5.82835594" z3="2.23014479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.66020366" y3="-6.27054282" z3="0.15904501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.03968582" y3="1.86817835" z3="-2.58354803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43877997" y3="2.82961865" z3="-0.7105335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78233383" y3="0.19413912" z3="-1.85423344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08212177" y3="1.43177982" z3="-1.75091502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.99122325" y3="0.13451449" z3="-2.60101532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47530633" y3="1.24299678" z3="-3.25027622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52389013" y3="-0.81967429" z3="-2.65954967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40329913" y3="1.18456116" z3="-3.82582197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59258319" y3="2.5521207" z3="-2.4652483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75622215" y3="2.46067304" z3="-3.19079343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04458879" y3="3.49595537" z3="-2.44129996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12585046" y3="3.33575166" z3="-3.73280637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56948954" y3="3.94409301" z3="-0.2684024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71360069" y3="5.08197692" z3="-0.18808774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88841096" y3="4.0578419" z3="0.2541352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34461898" y3="5.24483064" z3="0.77524278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54263197" y3="3.18376047" z3="0.24518841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36162007" y3="5.30606658" z3="1.17284788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.21967398" y3="6.30058236" z3="0.34300581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.50812946" y3="6.38641527" z3="0.80890263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.55555107" y3="7.16943385" z3="0.38492524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.88516376" y3="7.32727129" z3="1.21937219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40927002" y3="-3.6083884" z3="-2.95402441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.66163128" y3="-4.65831996" z3="-2.74042215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24876602" y3="-3.16723578" z3="-3.52368551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52425373" y3="-3.58946248" z3="-3.60923141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65216065" y3="-1.39860307" z3="-1.9126784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44580182" y3="-0.74521106" z3="-2.32241233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.26599918" y3="-0.93314436" z3="-0.9932568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82749198" y3="-1.40547453" z3="-2.64371942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0468,-.9399,-.5689;6.7618,-1.9237,-1.3834;6.235,-.9725,-1.2591;4.8771,1.4872,-.9748;4.3954,.3186,-.4103;2.7291,2.677,-1.205;4.061,2.7279,-.8324;2.3564,4.9687,-.5883;1.8426,3.7847,-1.0623;1.7032,5.8408,-.4855;2.2181,1.5106,-1.69;3.2165,.3486,.2767;1.8237,.32,-.6134;.6907,.6767,.2754;1.814,-.9421,-1.4486;1.0789,-2.4744,-1.3175;1.8602,-5.3123,-6.3954;1.6167,-4.9079,-5.4087;.9758,-3.8447,-2.9023;1.6064,-3.5321,-5.2136;1.337,-5.7678,-4.3443;1.031,-5.2302,-3.0996;1.2956,-2.9705,-3.9661;1.8335,-2.8398,-6.0281;1.3706,-6.8521,-4.4773;.8475,-5.8889,-2.2463;.5951,-3.3334,-1.6359;-.4324,-3.8047,-.9175;-.8151,-4.777,-1.2407;-.4641,-3.5871,.5472;-.5975,-3.2672,3.3276;-.9134,-4.6343,1.362;-.0863,-2.3763,1.1385;-.1544,-2.2195,2.5199;-.9727,-4.4781,2.7446;-1.1841,-5.5938,.9119;.2433,-1.5233,.5423;.1504,-1.2639,2.9557;-1.2936,-5.315,3.3707;-.6386,-3.1468,4.4141;1.2631,-1.6351,-3.8795;1.4756,-1.286,-2.9679;.3907,3.5853,-1.3043;-2.1517,-2.8048,-1.6959;-2.9665,-3.0519,-.5873;-3.0879,-2.2732,.4363;-3.8014,-.7596,.9138;-5.1132,-.4093,-.3637;-2.4934,.547,1.078;-4.5152,-1.1836,2.5903;-3.5485,-4.238,-.4897;-4.3288,-4.5343,.6581;-4.6887,-.258,-1.3692;-5.6452,.5219,-.1102;-5.8528,-1.2285,-.4141;-1.9481,.7863,.1487;-1.724,.2527,1.8157;-2.9783,1.4735,1.4391;-4.9493,-.2865,3.0687;-5.3092,-1.9476,2.5214;-3.7199,-1.5709,3.2537;-5.2301,-3.8993,.6866;-3.744,-4.393,1.5802;-4.6233,-5.5866,.5496;4.3797,-2.1817,-.0967;4.165,-3.2273,-1.0052;3.4523,-4.3617,-.6355;2.9671,-4.4478,.6644;3.1951,-3.4458,1.6032;3.8943,-2.3105,1.2131;4.5121,-3.125,-2.0366;3.2462,-5.1567,-1.3531;2.1558,-5.6048,1.0493;2.7974,-3.5523,2.6132;4.0465,-1.5006,1.9286;-.5248,3.9722,-.3162;-1.8755,3.6721,-.4347;-2.3047,2.9662,-1.5536;-1.4311,2.6106,-2.5778;-.0865,2.9316,-2.4508;-.1621,4.4646,.5895;-2.5877,3.9376,.3468;-3.7011,2.5292,-1.6258;-1.8044,2.0701,-3.4482;.6091,2.6348,-3.2367;2.0098,-5.8284,2.2301;1.6602,-6.2705,.159;-4.0397,1.8682,-2.5835;-4.4388,2.8296,-.7105;6.7823,.1941,-1.8542;6.0821,1.4318,-1.7509;7.9912,.1345,-2.601;8.4753,1.243,-3.2503;8.5239,-.8197,-2.6595;9.4033,1.1846,-3.8258;6.5926,2.5521,-2.4652;7.7562,2.4607,-3.1908;6.0446,3.496,-2.4413;8.1259,3.3358,-3.7328;4.5695,3.9441,-.2684;3.7136,5.082,-.1881;5.8884,4.0578,.2541;6.3446,5.2448,.7752;6.5426,3.1838,.2452;7.3616,5.3061,1.1728;4.2197,6.3006,.343;5.5081,6.3864,.8089;3.5556,7.1694,.3849;5.8852,7.3273,1.2194;-2.4093,-3.6084,-2.954;-2.6616,-4.6583,-2.7404;-3.2488,-3.1672,-3.5237;-1.5243,-3.5895,-3.6092;-1.6522,-1.3986,-1.9127;-2.4458,-.7452,-2.3224;-1.266,-.9331,-.9933;-.8275,-1.4055,-2.6437;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661875104583</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007278974332 0.000676879921 0.033398939018 0.005338117699</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037665942 -0.002294871 0.000067110 0.000161279 0.000203124 0.000239814 0.000313685 0.000377576 0.000412044 0.000495519 0.000633064 0.000751981 0.000767907 0.000818929 0.000876906 0.000941989 0.000969208 0.001166530 0.001186587 0.001228737 0.001271198 0.001407305 0.001411637 0.001478036 0.001673894 0.001744389 0.001887989 0.002121201 0.002248424 0.002994527 0.003107159 0.003274338 0.003379926 0.003965402 0.004056115 0.004347025 0.004560083 0.004799799 0.005545401 0.005659768 0.005902065 0.006136913 0.006569490 0.006923532 0.007267886 0.007695903 0.007948995 0.008234727 0.009170801 0.009393061 0.009940734 0.010171623 0.010337037 0.012445319 0.012749336 0.013249915 0.014233729 0.014594294 0.014917755 0.015287944 0.015781011 0.016139057 0.016400780 0.016587183 0.017384799 0.018136517 0.018500773 0.020287655 0.021030685 0.022195262 0.022997472 0.023203082 0.024509862 0.025116675 0.025949728 0.026471885 0.026725051 0.027760695 0.029243655 0.029693555 0.030412285 0.031006160 0.031857308 0.032680829 0.034140716 0.037109153 0.037770837 0.038367701 0.039098215 0.040179877 0.040767334 0.043303580 0.045258813 0.046124471 0.047220318 0.048514572 0.049669430 0.050666515 0.051323334 0.051557105 0.051799813 0.052281424 0.052386760 0.052539882 0.053794223 0.054709242 0.056491833 0.056836864 0.056959307 0.057208623 0.057578064 0.058399129 0.059203300 0.059567187 0.060259017 0.060475560 0.061436910 0.061679269 0.064547697 0.064604776 0.065527256 0.067695691 0.067976378 0.069208200 0.071590495 0.072647324 0.076359019 0.076924903 0.080005789 0.080951267 0.082079628 0.086293982 0.089451285 0.090800255 0.092581370 0.092837861 0.094166052 0.095118654 0.095286542 0.095872963 0.096359676 0.096853919 0.097758884 0.098279461 0.099416335 0.099472682 0.100195997 0.101238514 0.101961306 0.102652409 0.103691446 0.104235388 0.105168286 0.106506634 0.107323719 0.107888452 0.108673582 0.110121685 0.112552570 0.113339278 0.116028276 0.116460028 0.117147383 0.119415789 0.122748361 0.125582002 0.127581453 0.128197051 0.131158812 0.133028808 0.135109977 0.136685880 0.141959390 0.144381272 0.145287436 0.145702958 0.146689853 0.147662971 0.152479564 0.157234238 0.159723205 0.169709208 0.173851565 0.174628438 0.180357469 0.183145875 0.184896881 0.185339963 0.188027139 0.189562546 0.200183585 0.201758861 0.203293890 0.204622472 0.206773118 0.207126539 0.208878702 0.209521678 0.212240796 0.215090826 0.216468158 0.224679550 0.231448243 0.232378393 0.232967441 0.234902546 0.243977487 0.248001924 0.254235730 0.254983223 0.256667707 0.258683240 0.271367161 0.276168217 0.289387339 0.295194056 0.297074795 0.299192293 0.303813599 0.305847013 0.307519423 0.310706578 0.320018566 0.321770905 0.324629506 0.327616028 0.344436956 0.346319987 0.346883188 0.350433079 0.354656454 0.358629845 0.360330950 0.363836802 0.371541492 0.380186282 0.404518851 0.424770062 0.430029047 0.444297902 0.462672431 0.462986298 0.473950657 0.474739509 0.477886590 0.479941058 0.498018623 0.506297127 0.541056864 0.560989713 0.566710437 0.570259784 0.583215009 0.599748951 0.604162637 0.633046352 0.642886291 0.665259555 0.670246537 0.675173060 0.681284061 0.687654057 0.691236656 0.691649648 0.704240375 0.704741076 0.713567799 0.737060549 0.750678932 0.771570235 0.775825538 0.797855104 0.804741302 0.811517348 0.814930950 0.816339340 0.819490358 0.820309256 0.829011329 0.829405263 0.830666021 0.836377333 0.840490923 0.843021981 0.844624204 0.848604364 0.856409063 0.859240781 0.867333192 0.871711110 0.874891611 0.886484459 0.887696447 0.893578679 0.914733204 0.923899765 0.930844314 0.933614233 0.958344460 0.969113430 0.975821576 0.989117381 0.999612206 1.012915229 1.034008600 1.042602655 1.049150962 1.055208212 1.072728290 1.084181291 1.088640128 1.109989631 1.110584524 1.116090733 1.122411291 1.123318261 1.133999913 1.142167313 1.161139677 1.168704132 1.172568988 1.173187329 1.200371604 1.203651115 1.214491889 1.246850217 1.252729356 1.291742781 1.295700206 1.314055729 1.326087522 1.326420171 1.330135793 1.334384197 1.334668870 1.340918207 1.345755933 1.362010071 1.377252435 1.378847620 1.380938453 1.381563047 1.557329267 1.662612634 1.671875185</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">19</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.04306711" y3="-0.93993542" z3="-0.57132858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.75826969" y3="-1.92456583" z3="-1.38447391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.23184468" y3="-0.97310028" z3="-1.26062299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87553154" y3="1.48737028" z3="-0.97642324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.39227588" y3="0.31884195" z3="-0.41300639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72893772" y3="2.67960042" z3="-1.20628061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06076939" y3="2.72883704" z3="-0.83324438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35774738" y3="4.97017177" z3="-0.58479078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84314021" y3="3.78743519" z3="-1.06084346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70493545" y3="5.84234543" z3="-0.4798355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21731196" y3="1.51441532" z3="-1.6937311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21254369" y3="0.3493818" z3="0.27267349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.82081458" y3="0.32281316" z3="-0.61922412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.68669963" y3="0.67960775" z3="0.26838572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.81125524" y3="-0.93870659" z3="-1.45526037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0787696" y3="-2.47251322" z3="-1.32029017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85677895" y3="-5.31633095" z3="-6.39554804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61405043" y3="-4.91083408" z3="-5.40914176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97508958" y3="-3.84496907" z3="-2.90331742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60246059" y3="-3.53487026" z3="-5.21586738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33669082" y3="-5.769633" z3="-4.34318459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03157899" y3="-5.23068815" z3="-3.09879041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29258" y3="-2.97179813" z3="-3.96871147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82772236" y3="-2.84342063" z3="-6.03158341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37129421" y3="-6.85409238" z3="-4.474708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.84987164" y3="-5.88844044" z3="-2.24441165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59535982" y3="-3.33236358" z3="-1.63705651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.42978085" y3="-3.80443444" z3="-0.91617327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.8118846" y3="-4.77761853" z3="-1.23756697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.46013079" y3="-3.58399296" z3="0.54802287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.58834975" y3="-3.25985452" z3="3.32811209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.90494709" y3="-4.63110295" z3="1.36550372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08465255" y3="-2.37112072" z3="1.13641632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1500602" y3="-2.21223687" z3="2.51764667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.96153017" y3="-4.47265842" z3="2.74799589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.17372818" y3="-5.59211523" z3="0.91761801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.24125117" y3="-1.51830147" z3="0.53809676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15285402" y3="-1.25493342" z3="2.95108831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.27887575" y3="-5.30936173" z3="3.37615416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.62768236" y3="-3.13761678" z3="4.41444512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25866309" y3="-1.63638716" z3="-3.88410601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47167697" y3="-1.28544446" z3="-2.97336463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.39091349" y3="3.5886492" z3="-1.30137019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15371522" y3="-2.80784058" z3="-1.69432236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96624299" y3="-3.05393802" z3="-0.58397403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09154661" y3="-2.27121527" z3="0.4359975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80572373" y3="-0.75821072" z3="0.91128735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.10796036" y3="-0.41015697" z3="-0.37814617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49494707" y3="0.5447622" z3="1.08467701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.52925898" y3="-1.18204835" z3="2.5810214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.54284751" y3="-4.24273962" z3="-0.4817762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.32120549" y3="-4.53889989" z3="0.66719292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.6678863" y3="-0.27258653" z3="-1.38368392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.64510806" y3="0.52872376" z3="-0.14355814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.84841103" y3="-1.22861636" z3="-0.43104117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.94412459" y3="0.7802341" z3="0.16194984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.73462576" y3="0.25058457" z3="1.82504689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97994802" y3="1.47437605" z3="1.43566186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.95969433" y3="-0.28477947" z3="3.05780421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.3247506" y3="-1.94363505" z3="2.50937524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.73808712" y3="-1.57160866" z3="3.24325411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.22425961" y3="-3.90620038" z3="0.6953025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.73598285" y3="-4.39423554" z3="1.58846512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.61298513" y3="-5.59229511" z3="0.56104036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37590876" y3="-2.18161368" z3="-0.0989959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16253106" y3="-3.22796659" z3="-1.00700037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45178133" y3="-4.36334028" z3="-0.63647153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96714317" y3="-4.44962243" z3="0.66353766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19327638" y3="-3.44650527" z3="1.60167451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.89043563" y3="-2.31029272" z3="1.21077721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5095545" y3="-3.12575152" z3="-2.03841764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24699315" y3="-5.15904799" z3="-1.35357415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.15845872" y3="-5.60811863" z3="1.04942207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79578116" y3="-3.55303104" z3="2.61174591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.04140223" y3="-1.49966449" z3="1.92579721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52293472" y3="3.97290951" z3="-0.31067263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87373701" y3="3.6729148" z3="-0.42746594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30482394" y3="2.97005924" z3="-1.54754179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.43299647" y3="2.61749172" z3="-2.57443868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.08811033" y3="2.9378414" z3="-2.44873568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.15868406" y3="4.46295866" z3="0.59562183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.58475519" y3="3.93704044" z3="0.35546577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70225343" y3="2.53623852" z3="-1.62039783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.80799006" y3="2.07999325" z3="-3.44601026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.60631499" y3="2.6430038" z3="-3.23641548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.01535126" y3="-5.83271028" z3="2.23036008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.66205685" y3="-6.27395673" z3="0.15964475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.04768615" y3="1.89091083" z3="-2.59126072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43519315" y3="2.82588259" z3="-0.69461156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.78043537" y3="0.1932812" z3="-1.85502553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.08110796" y3="1.43138875" z3="-1.75162908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98983379" y3="0.1330693" z3="-2.6009515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.4752499" y3="1.24150155" z3="-3.24929582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.52181816" y3="-0.821495" z3="-2.65956574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40361692" y3="1.18263699" z3="-3.82419683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59299019" y3="2.55172104" z3="-2.46496729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75709089" y3="2.45972678" z3="-3.18969919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04572804" y3="3.4959801" z3="-2.44089629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12782916" y3="3.33479099" z3="-3.73097635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57026595" y3="3.943702" z3="-0.26732276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71515691" y3="5.08202225" z3="-0.18498673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.8893685" y3="4.05573766" z3="0.25515467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34649059" y3="5.24159658" z3="0.77803326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54307086" y3="3.18129025" z3="0.24457383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36364186" y3="5.30153897" z3="1.17545522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2221499" y3="6.29943279" z3="0.34797714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51076846" y3="6.38367691" z3="0.81370985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.55861079" y3="7.16864997" z3="0.39145729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.88852882" y3="7.32363063" z3="1.22558089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41099624" y3="-3.61540804" z3="-2.95024074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.6603965" y3="-4.66554172" z3="-2.73385221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25245425" y3="-3.17777159" z3="-3.51995334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52701807" y3="-3.59593512" z3="-3.60685272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65557278" y3="-1.40198803" z3="-1.91512313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4488454" y3="-0.75084973" z3="-2.32912707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.27219983" y3="-0.93276888" z3="-0.99647078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82924756" y3="-1.41027503" z3="-2.6443613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0431,-.9399,-.5713;6.7583,-1.9246,-1.3845;6.2318,-.9731,-1.2606;4.8755,1.4874,-.9764;4.3923,.3188,-.413;2.7289,2.6796,-1.2063;4.0608,2.7288,-.8332;2.3577,4.9702,-.5848;1.8431,3.7874,-1.0608;1.7049,5.8423,-.4798;2.2173,1.5144,-1.6937;3.2125,.3494,.2727;1.8208,.3228,-.6192;.6867,.6796,.2684;1.8113,-.9387,-1.4553;1.0788,-2.4725,-1.3203;1.8568,-5.3163,-6.3955;1.6141,-4.9108,-5.4091;.9751,-3.845,-2.9033;1.6025,-3.5349,-5.2159;1.3367,-5.7696,-4.3432;1.0316,-5.2307,-3.0988;1.2926,-2.9718,-3.9687;1.8277,-2.8434,-6.0316;1.3713,-6.8541,-4.4747;.8499,-5.8884,-2.2444;.5954,-3.3324,-1.6371;-.4298,-3.8044,-.9162;-.8119,-4.7776,-1.2376;-.4601,-3.584,.548;-.5883,-3.2599,3.3281;-.9049,-4.6311,1.3655;-.0847,-2.3711,1.1364;-.1501,-2.2122,2.5176;-.9615,-4.4727,2.748;-1.1737,-5.5921,.9176;.2413,-1.5183,.5381;.1529,-1.2549,2.9511;-1.2789,-5.3094,3.3762;-.6277,-3.1376,4.4144;1.2587,-1.6364,-3.8841;1.4717,-1.2854,-2.9734;.3909,3.5886,-1.3014;-2.1537,-2.8078,-1.6943;-2.9662,-3.0539,-.584;-3.0915,-2.2712,.436;-3.8057,-.7582,.9113;-5.108,-.4102,-.3781;-2.4949,.5448,1.0847;-4.5293,-1.182,2.581;-3.5428,-4.2427,-.4818;-4.3212,-4.5389,.6672;-4.6679,-.2726,-1.3837;-5.6451,.5287,-.1436;-5.8484,-1.2286,-.431;-1.9441,.7802,.1619;-1.7346,.2506,1.825;-2.9799,1.4744,1.4357;-4.9597,-.2848,3.0578;-5.3248,-1.9436,2.5094;-3.7381,-1.5716,3.2433;-5.2243,-3.9062,.6953;-3.736,-4.3942,1.5885;-4.613,-5.5923,.561;4.3759,-2.1816,-.099;4.1625,-3.228,-1.007;3.4518,-4.3633,-.6365;2.9671,-4.4496,.6635;3.1933,-3.4465,1.6017;3.8904,-2.3103,1.2108;4.5096,-3.1258,-2.0384;3.247,-5.159,-1.3536;2.1585,-5.6081,1.0494;2.7958,-3.553,2.6117;4.0414,-1.4997,1.9258;-.5229,3.9729,-.3107;-1.8737,3.6729,-.4275;-2.3048,2.9701,-1.5475;-1.433,2.6175,-2.5744;-.0881,2.9378,-2.4487;-.1587,4.463,.5956;-2.5848,3.937,.3555;-3.7023,2.5362,-1.6204;-1.808,2.08,-3.446;.6063,2.643,-3.2364;2.0154,-5.8327,2.2304;1.6621,-6.274,.1596;-4.0477,1.8909,-2.5913;-4.4352,2.8259,-.6946;6.7804,.1933,-1.855;6.0811,1.4314,-1.7516;7.9898,.1331,-2.601;8.4752,1.2415,-3.2493;8.5218,-.8215,-2.6596;9.4036,1.1826,-3.8242;6.593,2.5517,-2.465;7.7571,2.4597,-3.1897;6.0457,3.496,-2.4409;8.1278,3.3348,-3.731;4.5703,3.9437,-.2673;3.7152,5.082,-.185;5.8894,4.0557,.2552;6.3465,5.2416,.778;6.5431,3.1813,.2446;7.3636,5.3015,1.1755;4.2221,6.2994,.348;5.5108,6.3837,.8137;3.5586,7.1686,.3915;5.8885,7.3236,1.2256;-2.411,-3.6154,-2.9502;-2.6604,-4.6655,-2.7339;-3.2525,-3.1778,-3.52;-1.527,-3.5959,-3.6069;-1.6556,-1.402,-1.9151;-2.4488,-.7508,-2.3291;-1.2722,-.9328,-.9965;-.8292,-1.4103,-2.6444;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661904206194</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005200897251 0.000541319857 0.028228211255 0.005337051409</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037670213 -0.001759469 0.000067202 0.000162690 0.000218281 0.000239772 0.000313668 0.000380064 0.000412261 0.000495554 0.000633067 0.000752558 0.000768047 0.000819342 0.000876514 0.000943423 0.000974635 0.001173575 0.001202986 0.001230618 0.001271201 0.001407334 0.001412545 0.001478579 0.001677163 0.001746681 0.001901103 0.002127960 0.002303557 0.002994703 0.003107213 0.003328115 0.003397590 0.003978231 0.004078293 0.004388589 0.004577636 0.004803155 0.005549371 0.005733209 0.005913662 0.006190061 0.006569459 0.006923691 0.007271813 0.007755929 0.007991338 0.008293452 0.009184476 0.009445450 0.010017664 0.010219170 0.010439488 0.012469249 0.012749703 0.013251675 0.014237528 0.014598229 0.014921229 0.015289112 0.015782069 0.016146723 0.016401213 0.016811301 0.017390214 0.018224922 0.018607572 0.020289825 0.021032279 0.022195894 0.022998917 0.023205788 0.024514767 0.025156958 0.025951152 0.026475401 0.026725643 0.027760830 0.029294051 0.029694425 0.030412312 0.031010574 0.031861409 0.032683211 0.034299912 0.037116563 0.037772083 0.038420705 0.039099263 0.040216873 0.040769138 0.043319462 0.045259147 0.046124485 0.047439805 0.048641148 0.049669452 0.050666598 0.051323728 0.051557244 0.051799805 0.052281428 0.052386762 0.052540079 0.053794744 0.054709478 0.056491868 0.056836963 0.056960122 0.057208723 0.057579278 0.058401147 0.059203823 0.059580126 0.060262017 0.060476176 0.061436960 0.061679406 0.064547867 0.064605750 0.065527249 0.067695717 0.067978597 0.069209041 0.071591855 0.072647383 0.076361929 0.076927474 0.080008396 0.080952395 0.082080289 0.086297504 0.089451447 0.090800214 0.092584408 0.092837949 0.094166945 0.095121084 0.095286919 0.095875144 0.096360973 0.096855950 0.097810018 0.098350737 0.099420836 0.099503047 0.100316269 0.101240443 0.101961839 0.102655241 0.103691395 0.104235185 0.105167301 0.106507266 0.107324636 0.107930198 0.108674414 0.110121658 0.112552560 0.113339744 0.116029433 0.116460189 0.117147996 0.119416144 0.122751421 0.125588467 0.127581228 0.128199734 0.131170359 0.133028820 0.135109912 0.136685771 0.141959471 0.144383453 0.145307023 0.145702872 0.146689636 0.147711465 0.152479586 0.157234391 0.159723428 0.169710497 0.173851810 0.174629790 0.180357471 0.183145876 0.184911950 0.185342675 0.188027301 0.189566503 0.200189792 0.201758879 0.203299096 0.204622437 0.206773300 0.207126597 0.208879435 0.209523078 0.212241039 0.215090888 0.216469321 0.224679952 0.231448379 0.232378642 0.232968456 0.234902745 0.243979488 0.248001939 0.254236418 0.254983248 0.256667716 0.258685695 0.271367154 0.276170907 0.289387309 0.295197436 0.297077058 0.299200563 0.303823015 0.305847013 0.307519436 0.310706481 0.320018829 0.321770933 0.324629594 0.327625832 0.344519597 0.346326470 0.346883458 0.350444136 0.354661415 0.358675671 0.361531311 0.363836862 0.372169294 0.380199467 0.404538966 0.424775568 0.430029373 0.444298125 0.462695061 0.462987565 0.474017535 0.474743508 0.477886592 0.480015328 0.498018660 0.506374394 0.541095203 0.561142115 0.566712278 0.570375363 0.583215224 0.599750979 0.604166022 0.633048304 0.642899640 0.665260156 0.670267728 0.675558874 0.681284351 0.688086992 0.691363479 0.691718208 0.704240380 0.704742998 0.713585764 0.737066072 0.750678944 0.771570253 0.775825832 0.797855124 0.805004643 0.811703620 0.814993203 0.816365617 0.819491657 0.820325681 0.829116787 0.829511966 0.830729304 0.836500364 0.840495866 0.844047201 0.844745227 0.848613094 0.856418603 0.859245826 0.867333459 0.871727125 0.874892520 0.886485013 0.887696568 0.893586224 0.914737118 0.923899994 0.930844454 0.933617826 0.958344817 0.969114473 0.975821996 0.989117477 0.999612209 1.012915227 1.034009003 1.042602662 1.049151170 1.055208277 1.072730597 1.084181352 1.088640263 1.109989654 1.110584524 1.116091384 1.122411297 1.123318259 1.134000207 1.142172512 1.161140253 1.168704248 1.172568987 1.173187527 1.200371881 1.203654570 1.214508175 1.246974370 1.254928060 1.291763179 1.295701923 1.314062010 1.326094931 1.326425650 1.330135846 1.334403861 1.335066962 1.340920287 1.345756059 1.362010771 1.377272758 1.378848201 1.380938576 1.381564117 1.557329820 1.662912041 1.671875849</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">20</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.03959334" y3="-0.94002071" z3="-0.57354343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.75483383" y3="-1.92531473" z3="-1.38575071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.22874294" y3="-0.97363205" z3="-1.26217904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87371615" y3="1.48747983" z3="-0.97802503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38931256" y3="0.31901595" z3="-0.41542623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72818803" y3="2.68180337" z3="-1.20701443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.06005363" y3="2.72955014" z3="-0.83396364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35841099" y3="4.97144302" z3="-0.58135315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84295357" y3="3.78973532" z3="-1.05900737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70603209" y3="5.84369977" z3="-0.47445913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.215888" y3="1.51778607" z3="-1.69660607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.20905121" y3="0.34996408" z3="0.26931929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.81816372" y3="0.32500203" z3="-0.62393712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.68345793" y3="0.68160496" z3="0.2630311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.80883651" y3="-0.93578146" z3="-1.46098569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0782031" y3="-2.47097578" z3="-1.32330256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85348381" y3="-5.31977098" z3="-6.39606736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61151164" y3="-4.91347482" z3="-5.40981389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97443699" y3="-3.84554503" z3="-2.9043156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59873714" y3="-3.53732893" z3="-5.21796761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33623861" y3="-5.77138034" z3="-4.34263085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03205568" y3="-5.23141369" z3="-3.09845837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28971992" y3="-2.97324964" z3="-3.97107881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82230903" y3="-2.84649874" z3="-6.03465123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37177157" y3="-6.85594128" z3="-4.4730415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.85193747" y3="-5.8884477" z3="-2.24320583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59584232" y3="-3.33204047" z3="-1.63814996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.4286838" y3="-3.80378791" z3="-0.91583328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.80911594" y3="-4.77843482" z3="-1.23465546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45661361" y3="-3.58168819" z3="0.54839594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5792602" y3="-3.25417246" z3="3.32839733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.89716221" y3="-4.62868036" z3="1.36826855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0829589" y3="-2.36711984" z3="1.13436139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14544954" y3="-2.20657442" z3="2.51550252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.95094006" y3="-4.46855496" z3="2.75071728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.16479264" y3="-5.59090223" z3="0.92234305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.23916836" y3="-1.51410671" z3="0.53427778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15631713" y3="-1.24801066" z3="2.94686952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.26488295" y3="-5.30517638" z3="3.38067694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.61616671" y3="-3.13071779" z3="4.41468883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25438586" y3="-1.63775366" z3="-3.88799062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.468132" y3="-1.28539223" z3="-2.97798137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.39037468" y3="3.59180893" z3="-1.29819134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15292225" y3="-2.81254788" z3="-1.69292222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96365935" y3="-3.05836312" z3="-0.58086654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08687538" y3="-2.27606927" z3="0.439863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80357188" y3="-0.75953591" z3="0.90356669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.09658218" y3="-0.41131545" z3="-0.39470821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49433257" y3="0.54318907" z3="1.08765232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.54582006" y3="-1.17653734" z3="2.56999256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.53913185" y3="-4.24676853" z3="-0.47693706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.31449652" y3="-4.5429257" z3="0.67440562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.65852291" y3="-0.27139927" z3="-1.3955234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.62885044" y3="0.5248289" z3="-0.15777716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.83910195" y3="-1.22785671" z3="-0.44768854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.92631871" y3="0.77308881" z3="0.17216967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.74678552" y3="0.25124359" z3="1.84610602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98424193" y3="1.47442365" z3="1.42859877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.98792254" y3="-0.27485867" z3="3.03532386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.34120681" y3="-1.93829154" z3="2.4910795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.76368349" y3="-1.56222308" z3="3.25360632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.21925979" y3="-3.91269188" z3="0.70278511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.72786283" y3="-4.39453286" z3="1.59427837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.60341309" y3="-5.59739329" z3="0.57094472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37249791" y3="-2.18169324" z3="-0.10112074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.160438" y3="-3.22866429" z3="-1.0087281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45150504" y3="-4.36496785" z3="-0.6376339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96740199" y3="-4.45157556" z3="0.66253912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19176365" y3="-3.44758195" z3="1.60014446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.88697435" y3="-2.31037384" z3="1.20864417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50733018" y3="-3.12641311" z3="-2.04018354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24792011" y3="-5.16132273" z3="-1.35435473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.16115435" y3="-5.61147876" z3="1.04909065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79449117" y3="-3.55426777" z3="2.61029576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.03664413" y3="-1.49913949" z3="1.92325207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52201667" y3="3.9739464" z3="-0.30539235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87314689" y3="3.67489072" z3="-0.4212351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30609384" y3="2.97553983" z3="-1.54281418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.4355511" y3="2.62450289" z3="-2.57123765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.09029503" y3="2.94357965" z3="-2.44630507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.15632756" y3="4.46165681" z3="0.60158572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.58295375" y3="3.9374323" z3="0.36337639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70400488" y3="2.5434075" z3="-1.61546292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.81194635" y3="2.08910316" z3="-3.44342263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.6031679" y3="2.64983427" z3="-3.23520211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.02064841" y3="-5.8371763" z3="2.23012127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.6639405" y3="-6.27729948" z3="0.15974801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.04953916" y3="1.89946373" z3="-2.58376816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4364454" y3="2.83171083" z3="-0.69035551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.77827507" y3="0.19254996" z3="-1.85604277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07967245" y3="1.43104382" z3="-1.75256676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98806265" y3="0.13183982" z3="-2.60128289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47458569" y3="1.24022865" z3="-3.24885636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.51944995" y3="-0.82305245" z3="-2.6599632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40325465" y3="1.18099529" z3="-3.82322741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59272237" y3="2.55136234" z3="-2.46507527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75720504" y3="2.45891163" z3="-3.18913313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04607699" y3="3.49597919" z3="-2.44087131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12887983" y3="3.33397141" z3="-3.7297682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57049225" y3="3.94326588" z3="-0.26641993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71611161" y3="5.08199238" z3="-0.18217493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.88981608" y3="4.05374642" z3="0.2558395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34784155" y3="5.23858514" z3="0.78022412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5430046" y3="3.17893854" z3="0.24378586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36515824" y3="5.29732893" z3="1.17740003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22403394" y3="6.29834135" z3="0.35231171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51285308" y3="6.38113836" z3="0.81774327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.5610434" y3="7.16790142" z3="0.39722396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.89133456" y3="7.32027888" z3="1.23079637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41147146" y3="-3.62201521" z3="-2.94716775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65862727" y3="-4.67217944" z3="-2.72878642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25481409" y3="-3.18661078" z3="-3.51558612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52879119" y3="-3.60187442" z3="-3.60546462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6581068" y3="-1.40598534" z3="-1.91743283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45219483" y3="-0.75843078" z3="-2.33528273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.27741747" y3="-0.93266275" z3="-0.99982384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.83061586" y3="-1.41450348" z3="-2.64523074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0396,-.94,-.5735;6.7548,-1.9253,-1.3858;6.2287,-.9736,-1.2622;4.8737,1.4875,-.978;4.3893,.319,-.4154;2.7282,2.6818,-1.207;4.0601,2.7296,-.834;2.3584,4.9714,-.5814;1.843,3.7897,-1.059;1.706,5.8437,-.4745;2.2159,1.5178,-1.6966;3.2091,.35,.2693;1.8182,.325,-.6239;.6835,.6816,.263;1.8088,-.9358,-1.461;1.0782,-2.471,-1.3233;1.8535,-5.3198,-6.3961;1.6115,-4.9135,-5.4098;.9744,-3.8455,-2.9043;1.5987,-3.5373,-5.218;1.3362,-5.7714,-4.3426;1.0321,-5.2314,-3.0985;1.2897,-2.9732,-3.9711;1.8223,-2.8465,-6.0347;1.3718,-6.8559,-4.473;.8519,-5.8884,-2.2432;.5958,-3.332,-1.6381;-.4287,-3.8038,-.9158;-.8091,-4.7784,-1.2347;-.4566,-3.5817,.5484;-.5793,-3.2542,3.3284;-.8972,-4.6287,1.3683;-.083,-2.3671,1.1344;-.1454,-2.2066,2.5155;-.9509,-4.4686,2.7507;-1.1648,-5.5909,.9223;.2392,-1.5141,.5343;.1563,-1.248,2.9469;-1.2649,-5.3052,3.3807;-.6162,-3.1307,4.4147;1.2544,-1.6378,-3.888;1.4681,-1.2854,-2.978;.3904,3.5918,-1.2982;-2.1529,-2.8125,-1.6929;-2.9637,-3.0584,-.5809;-3.0869,-2.2761,.4399;-3.8036,-.7595,.9036;-5.0966,-.4113,-.3947;-2.4943,.5432,1.0877;-4.5458,-1.1765,2.57;-3.5391,-4.2468,-.4769;-4.3145,-4.5429,.6744;-4.6585,-.2714,-1.3955;-5.6289,.5248,-.1578;-5.8391,-1.2279,-.4477;-1.9263,.7731,.1722;-1.7468,.2512,1.8461;-2.9842,1.4744,1.4286;-4.9879,-.2749,3.0353;-5.3412,-1.9383,2.4911;-3.7637,-1.5622,3.2536;-5.2193,-3.9127,.7028;-3.7279,-4.3945,1.5943;-4.6034,-5.5974,.5709;4.3725,-2.1817,-.1011;4.1604,-3.2287,-1.0087;3.4515,-4.365,-.6376;2.9674,-4.4516,.6625;3.1918,-3.4476,1.6001;3.887,-2.3104,1.2086;4.5073,-3.1264,-2.0402;3.2479,-5.1613,-1.3544;2.1612,-5.6115,1.0491;2.7945,-3.5543,2.6103;4.0366,-1.4991,1.9233;-.522,3.9739,-.3054;-1.8731,3.6749,-.4212;-2.3061,2.9755,-1.5428;-1.4356,2.6245,-2.5712;-.0903,2.9436,-2.4463;-.1563,4.4617,.6016;-2.583,3.9374,.3634;-3.704,2.5434,-1.6155;-1.8119,2.0891,-3.4434;.6032,2.6498,-3.2352;2.0206,-5.8372,2.2301;1.6639,-6.2773,.1597;-4.0495,1.8995,-2.5838;-4.4364,2.8317,-.6904;6.7783,.1925,-1.856;6.0797,1.431,-1.7526;7.9881,.1318,-2.6013;8.4746,1.2402,-3.2489;8.5194,-.8231,-2.66;9.4033,1.181,-3.8232;6.5927,2.5514,-2.4651;7.7572,2.4589,-3.1891;6.0461,3.496,-2.4409;8.1289,3.334,-3.7298;4.5705,3.9433,-.2664;3.7161,5.082,-.1822;5.8898,4.0537,.2558;6.3478,5.2386,.7802;6.543,3.1789,.2438;7.3652,5.2973,1.1774;4.224,6.2983,.3523;5.5129,6.3811,.8177;3.561,7.1679,.3972;5.8913,7.3203,1.2308;-2.4115,-3.622,-2.9472;-2.6586,-4.6722,-2.7288;-3.2548,-3.1866,-3.5156;-1.5288,-3.6019,-3.6055;-1.6581,-1.406,-1.9174;-2.4522,-.7584,-2.3353;-1.2774,-.9327,-.9998;-.8306,-1.4145,-2.6452;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661927097173</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003577102273 0.000452712302 0.029451071462 0.005337030359</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037677429 -0.001548064 0.000067210 0.000164925 0.000217906 0.000241779 0.000314146 0.000380008 0.000412126 0.000495632 0.000633083 0.000757001 0.000767970 0.000819403 0.000876238 0.000946685 0.000993398 0.001175011 0.001224137 0.001253850 0.001274106 0.001407226 0.001415585 0.001480693 0.001679410 0.001748591 0.001904949 0.002135305 0.002378903 0.002994706 0.003108712 0.003347458 0.003412472 0.003981698 0.004100972 0.004437989 0.004642152 0.004818763 0.005549480 0.005806003 0.005928677 0.006339944 0.006569578 0.006927664 0.007274410 0.007790242 0.008032986 0.008363311 0.009188419 0.009504141 0.010029335 0.010234977 0.010483157 0.012493365 0.012750759 0.013259305 0.014240917 0.014600226 0.014922886 0.015289087 0.015782126 0.016147786 0.016401200 0.016876019 0.017391824 0.018253648 0.018679869 0.020291311 0.021034844 0.022196056 0.022999377 0.023207035 0.024515999 0.025165776 0.025951601 0.026476572 0.026725906 0.027760828 0.029356102 0.029698745 0.030412309 0.031011557 0.031861233 0.032683346 0.034331960 0.037116603 0.037791677 0.038572423 0.039113662 0.040230475 0.040768885 0.043317690 0.045259087 0.046124475 0.047600929 0.049145549 0.049669500 0.050666817 0.051323771 0.051557287 0.051799813 0.052281428 0.052386760 0.052540439 0.053795417 0.054709932 0.056491925 0.056837076 0.056961309 0.057209283 0.057581437 0.058404964 0.059204568 0.059593184 0.060265176 0.060476555 0.061437006 0.061680596 0.064547989 0.064606479 0.065527477 0.067695699 0.067980197 0.069209343 0.071592727 0.072647417 0.076363709 0.076929669 0.080008930 0.080953666 0.082080881 0.086300040 0.089451621 0.090800225 0.092586257 0.092837953 0.094167664 0.095122242 0.095286973 0.095876366 0.096364944 0.096857225 0.097880872 0.098391194 0.099423382 0.099529411 0.100348231 0.101240711 0.101961781 0.102655166 0.103694274 0.104239975 0.105185851 0.106509512 0.107324814 0.107998553 0.108676779 0.110121657 0.112552551 0.113341418 0.116030661 0.116460341 0.117148299 0.119416204 0.122752453 0.125590676 0.127581100 0.128201055 0.131182240 0.133028813 0.135109883 0.136685766 0.141959612 0.144384792 0.145321677 0.145702946 0.146689575 0.147736167 0.152479722 0.157234539 0.159724165 0.169711507 0.173852165 0.174630868 0.180357464 0.183145848 0.184933278 0.185347617 0.188027758 0.189576469 0.200214042 0.201759590 0.203302839 0.204622604 0.206773384 0.207126615 0.208879738 0.209524306 0.212241161 0.215090999 0.216470650 0.224680154 0.231448497 0.232378817 0.232969213 0.234902910 0.243980502 0.248002103 0.254236827 0.254983294 0.256667714 0.258686640 0.271367149 0.276172847 0.289387434 0.295199127 0.297077429 0.299202388 0.303825821 0.305847098 0.307519441 0.310719834 0.320018839 0.321771270 0.324630660 0.327632157 0.344552130 0.346326198 0.346935395 0.350452476 0.354663250 0.358704300 0.363207059 0.363837639 0.372631370 0.380199769 0.404542670 0.424775932 0.430029392 0.444298140 0.462698831 0.462987593 0.474023191 0.474755464 0.477886596 0.480037692 0.498018660 0.506390422 0.541104224 0.561174983 0.566712674 0.570400014 0.583215224 0.599859194 0.604168962 0.633074772 0.642902429 0.665261933 0.670270633 0.676333715 0.681284497 0.688276747 0.691398753 0.691755483 0.704240382 0.704743992 0.713591043 0.737067573 0.750678945 0.771570259 0.775825912 0.797855259 0.805579011 0.811923746 0.815083156 0.816397183 0.819494716 0.820332301 0.829141513 0.829596083 0.830754140 0.836501473 0.840499457 0.844497637 0.845583866 0.848628028 0.856427851 0.859253364 0.867333587 0.871734012 0.874893343 0.886486285 0.887696864 0.893588901 0.914741595 0.923900058 0.930844557 0.933620057 0.958344929 0.969115457 0.975822246 0.989117592 0.999612208 1.012915272 1.034009101 1.042602724 1.049151204 1.055208280 1.072731323 1.084181364 1.088640318 1.109989664 1.110584523 1.116092251 1.122411298 1.123318262 1.134000877 1.142179217 1.161141028 1.168704270 1.172569001 1.173187570 1.200371949 1.203655703 1.214519810 1.246998293 1.255540948 1.291774836 1.295702463 1.314064208 1.326097784 1.326427442 1.330135895 1.334405907 1.335176098 1.340922339 1.345756023 1.362011122 1.377284495 1.378848716 1.380938604 1.381564727 1.557329979 1.663068345 1.671876488</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">21</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.03642927" y3="-0.94023395" z3="-0.57541768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.75185276" y3="-1.92595794" z3="-1.38672816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.22595792" y3="-0.9741353" z3="-1.26341146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87188398" y3="1.4874369" z3="-0.97927037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3864838" y3="0.31896936" z3="-0.41747703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72729268" y3="2.68359757" z3="-1.20735223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05919312" y3="2.73001844" z3="-0.83432973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35880707" y3="4.97240109" z3="-0.57783638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84261712" y3="3.79162026" z3="-1.056962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70677379" y3="5.8446949" z3="-0.46912159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.214338" y3="1.52064915" z3="-1.69898678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.20565711" y3="0.35011868" z3="0.26636109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.81560763" y3="0.32657122" z3="-0.62825483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.68009591" y3="0.68246423" z3="0.2580671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.80677824" y3="-0.93348107" z3="-1.46641006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07833392" y3="-2.46974087" z3="-1.32552121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84974785" y3="-5.3233452" z3="-6.39632657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60863614" y3="-4.9162024" z3="-5.410206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97381257" y3="-3.84616414" z3="-2.90506956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59464236" y3="-3.53986526" z3="-5.21990714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33567633" y3="-5.77322422" z3="-4.34168053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03256067" y3="-5.23219897" z3="-3.09770936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28671911" y3="-2.9746931" z3="-3.97321292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81638695" y3="-2.84969899" z3="-6.03766724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37214428" y3="-6.85789375" z3="-4.47093662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.85419537" y3="-5.88851992" z3="-2.2415213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59629131" y3="-3.33155076" z3="-1.63893597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.42582883" y3="-3.80430832" z3="-0.91408485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.80607435" y3="-4.77946683" z3="-1.23152686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45264066" y3="-3.57964512" z3="0.54956832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.57061601" y3="-3.24839904" z3="3.32921774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.88888512" y3="-4.62667599" z3="1.37170819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.081618" y3="-2.36297859" z3="1.1329179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14170393" y3="-2.20057439" z3="2.51391461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.94016793" y3="-4.46470275" z3="2.75404105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.15473551" y3="-5.5903142" z3="0.92769223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.23654574" y3="-1.50977462" z3="0.53095866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15824052" y3="-1.24041332" z3="2.94312933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.25044337" y3="-5.30135409" z3="3.38580808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.60551494" y3="-3.12352023" z3="4.41539561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25006286" y3="-1.63917072" z3="-3.89168312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46450635" y3="-1.28533664" z3="-2.98240111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3897481" y3="3.59451139" z3="-1.29482403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15456667" y3="-2.81559932" z3="-1.69096008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96261763" y3="-3.06043808" z3="-0.57682609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08806767" y3="-2.27477535" z3="0.44133311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80790593" y3="-0.75688832" z3="0.89839443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.0891629" y3="-0.41009659" z3="-0.41173104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49609809" y3="0.54224" z3="1.09395003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.55988381" y3="-1.1722901" z3="2.55863096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.53395341" y3="-4.25105682" z3="-0.46867205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.30748778" y3="-4.54653932" z3="0.68378128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.63737183" y3="-0.28076058" z3="-1.41195124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.62093429" y3="0.53233148" z3="-0.18722823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.83386992" y3="-1.22444675" z3="-0.46715339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.91148172" y3="0.76851627" z3="0.18689668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.76139306" y3="0.24935034" z3="1.86320442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98691274" y3="1.47607794" z3="1.42496066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.99058414" y3="-0.27292725" z3="3.02782412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.35775273" y3="-1.93042107" z3="2.47771664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.7804266" y3="-1.56442309" z3="3.22941199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.21348039" y3="-3.91817743" z3="0.71207143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.72028114" y3="-4.39533127" z3="1.60267749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.59429854" y3="-5.601711" z3="0.58246038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36944948" y3="-2.18196834" z3="-0.10300853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15881577" y3="-3.2295019" z3="-1.0103134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45165511" y3="-4.3667647" z3="-0.63882002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96788997" y3="-4.45377023" z3="0.66145119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19036256" y3="-3.44895666" z3="1.59861617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.88370323" y3="-2.3107421" z3="1.20667659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50574742" y3="-3.12715897" z3="-2.04174261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.24940472" y3="-5.16374062" z3="-1.35523436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.16416277" y3="-5.61519287" z3="1.04854809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79318916" y3="-3.55586499" z3="2.60879211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.03199686" y3="-1.49896913" z3="1.92096232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.5211209" y3="3.97438856" z3="-0.29972217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87245994" y3="3.67601491" z3="-0.41444109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30715444" y3="2.98010031" z3="-1.53744607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.43817436" y3="2.63144319" z3="-2.56809274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.09252485" y3="2.94915443" z3="-2.44387192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1540507" y3="4.45981215" z3="0.60792977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.58125832" y3="3.93717777" z3="0.37153121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70615447" y3="2.55148525" z3="-1.61110784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.81617682" y3="2.098936" z3="-3.44143574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.59999503" y3="2.65677243" z3="-3.23417537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.02634244" y3="-5.84223017" z3="2.22963879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.66612293" y3="-6.28086171" z3="0.15952282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.05650885" y3="1.91914226" z3="-2.58729839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43550775" y3="2.83273764" z3="-0.6804689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.77624873" y3="0.19191871" z3="-1.85678017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07817364" y3="1.43068977" z3="-1.7532518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98641281" y3="0.13087752" z3="-2.60138005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47381163" y3="1.23926383" z3="-3.24828884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.51738337" y3="-0.82424452" z3="-2.66007484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40278416" y3="1.17979872" z3="-3.82214478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59212661" y3="2.55102096" z3="-2.46508975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.7569656" y3="2.45826561" z3="-3.18853621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04590559" y3="3.49588505" z3="-2.44084168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12937038" y3="3.33333279" z3="-3.72865251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57049237" y3="3.94271195" z3="-0.26531917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71677308" y3="5.08180082" z3="-0.17930255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89002964" y3="4.05182759" z3="0.25668633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34887722" y3="5.23577265" z3="0.7823742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54275976" y3="3.17670183" z3="0.24333602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36635619" y3="5.2934561" z3="1.17928304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22552561" y3="6.29722047" z3="0.35649715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51455085" y3="6.37875034" z3="0.82156671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.56300421" y3="7.16707023" z3="0.40270905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.89369338" y3="7.31718005" z3="1.2356252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41296627" y3="-3.6288611" z3="-2.94296791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65760974" y3="-4.67912111" z3="-2.72196555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25796497" y3="-3.19650575" z3="-3.51138874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53124689" y3="-3.60836497" z3="-3.60258309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66149379" y3="-1.40936703" z3="-1.91977853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45603603" y3="-0.7652094" z3="-2.34188203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.28368897" y3="-0.93184181" z3="-1.00317586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.83258013" y3="-1.41895152" z3="-2.64600162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0364,-.9402,-.5754;6.7519,-1.926,-1.3867;6.226,-.9741,-1.2634;4.8719,1.4874,-.9793;4.3865,.319,-.4175;2.7273,2.6836,-1.2074;4.0592,2.73,-.8343;2.3588,4.9724,-.5778;1.8426,3.7916,-1.057;1.7068,5.8447,-.4691;2.2143,1.5206,-1.699;3.2057,.3501,.2664;1.8156,.3266,-.6283;.6801,.6825,.2581;1.8068,-.9335,-1.4664;1.0783,-2.4697,-1.3255;1.8497,-5.3233,-6.3963;1.6086,-4.9162,-5.4102;.9738,-3.8462,-2.9051;1.5946,-3.5399,-5.2199;1.3357,-5.7732,-4.3417;1.0326,-5.2322,-3.0977;1.2867,-2.9747,-3.9732;1.8164,-2.8497,-6.0377;1.3721,-6.8579,-4.4709;.8542,-5.8885,-2.2415;.5963,-3.3316,-1.6389;-.4258,-3.8043,-.9141;-.8061,-4.7795,-1.2315;-.4526,-3.5796,.5496;-.5706,-3.2484,3.3292;-.8889,-4.6267,1.3717;-.0816,-2.363,1.1329;-.1417,-2.2006,2.5139;-.9402,-4.4647,2.754;-1.1547,-5.5903,.9277;.2365,-1.5098,.531;.1582,-1.2404,2.9431;-1.2504,-5.3014,3.3858;-.6055,-3.1235,4.4154;1.2501,-1.6392,-3.8917;1.4645,-1.2853,-2.9824;.3897,3.5945,-1.2948;-2.1546,-2.8156,-1.691;-2.9626,-3.0604,-.5768;-3.0881,-2.2748,.4413;-3.8079,-.7569,.8984;-5.0892,-.4101,-.4117;-2.4961,.5422,1.094;-4.5599,-1.1723,2.5586;-3.534,-4.2511,-.4687;-4.3075,-4.5465,.6838;-4.6374,-.2808,-1.412;-5.6209,.5323,-.1872;-5.8339,-1.2244,-.4672;-1.9115,.7685,.1869;-1.7614,.2494,1.8632;-2.9869,1.4761,1.425;-4.9906,-.2729,3.0278;-5.3578,-1.9304,2.4777;-3.7804,-1.5644,3.2294;-5.2135,-3.9182,.7121;-3.7203,-4.3953,1.6027;-4.5943,-5.6017,.5825;4.3694,-2.182,-.103;4.1588,-3.2295,-1.0103;3.4517,-4.3668,-.6388;2.9679,-4.4538,.6615;3.1904,-3.449,1.5986;3.8837,-2.3107,1.2067;4.5057,-3.1272,-2.0417;3.2494,-5.1637,-1.3552;2.1642,-5.6152,1.0485;2.7932,-3.5559,2.6088;4.032,-1.499,1.921;-.5211,3.9744,-.2997;-1.8725,3.676,-.4144;-2.3072,2.9801,-1.5374;-1.4382,2.6314,-2.5681;-.0925,2.9492,-2.4439;-.1541,4.4598,.6079;-2.5813,3.9372,.3715;-3.7062,2.5515,-1.6111;-1.8162,2.0989,-3.4414;.6,2.6568,-3.2342;2.0263,-5.8422,2.2296;1.6661,-6.2809,.1595;-4.0565,1.9191,-2.5873;-4.4355,2.8327,-.6805;6.7762,.1919,-1.8568;6.0782,1.4307,-1.7533;7.9864,.1309,-2.6014;8.4738,1.2393,-3.2483;8.5174,-.8242,-2.6601;9.4028,1.1798,-3.8221;6.5921,2.551,-2.4651;7.757,2.4583,-3.1885;6.0459,3.4959,-2.4408;8.1294,3.3333,-3.7287;4.5705,3.9427,-.2653;3.7168,5.0818,-.1793;5.89,4.0518,.2567;6.3489,5.2358,.7824;6.5428,3.1767,.2433;7.3664,5.2935,1.1793;4.2255,6.2972,.3565;5.5146,6.3788,.8216;3.563,7.1671,.4027;5.8937,7.3172,1.2356;-2.413,-3.6289,-2.943;-2.6576,-4.6791,-2.722;-3.258,-3.1965,-3.5114;-1.5312,-3.6084,-3.6026;-1.6615,-1.4094,-1.9198;-2.456,-.7652,-2.3419;-1.2837,-.9318,-1.0032;-.8326,-1.419,-2.646;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661945422426</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004149826942 0.000496491431 0.026739342321 0.005336615034</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037680283 -0.001778586 0.000068534 0.000165489 0.000219198 0.000241718 0.000315062 0.000379971 0.000412071 0.000495792 0.000633151 0.000757462 0.000767756 0.000819906 0.000876136 0.000946031 0.000994618 0.001175012 0.001226611 0.001267428 0.001316779 0.001409006 0.001415318 0.001482682 0.001685981 0.001749228 0.001906741 0.002144093 0.002448126 0.002994909 0.003125878 0.003349505 0.003411630 0.003981635 0.004101781 0.004450788 0.004704250 0.004839837 0.005549466 0.005873193 0.005945604 0.006565462 0.006629190 0.006961737 0.007277647 0.007819309 0.008091091 0.008476778 0.009191387 0.009599887 0.010031697 0.010249728 0.010488030 0.012515318 0.012752957 0.013277968 0.014243130 0.014601630 0.014924309 0.015289270 0.015782176 0.016147953 0.016401221 0.016871811 0.017391718 0.018254591 0.018680911 0.020291700 0.021038978 0.022196038 0.022999344 0.023207235 0.024515905 0.025166844 0.025951584 0.026476481 0.026725880 0.027760832 0.029452816 0.029723947 0.030412703 0.031011670 0.031867603 0.032684428 0.034345318 0.037153015 0.037819443 0.038680474 0.039137561 0.040229389 0.040771739 0.043341461 0.045259224 0.046124492 0.047617828 0.049669260 0.049939762 0.050668113 0.051323761 0.051557306 0.051799837 0.052281427 0.052386760 0.052541227 0.053796381 0.054710594 0.056492047 0.056837200 0.056963075 0.057210711 0.057584889 0.058411437 0.059205875 0.059617265 0.060272130 0.060477722 0.061437015 0.061683094 0.064548065 0.064607283 0.065527654 0.067695984 0.067984942 0.069211770 0.071592912 0.072647432 0.076364164 0.076930768 0.080008917 0.080953539 0.082081219 0.086301108 0.089451751 0.090800344 0.092586952 0.092837958 0.094167966 0.095122271 0.095287115 0.095877062 0.096369091 0.096857236 0.097950781 0.098416259 0.099424601 0.099545721 0.100350628 0.101241491 0.101961774 0.102655572 0.103715407 0.104260036 0.105242318 0.106513958 0.107324925 0.108063030 0.108679265 0.110121680 0.112552540 0.113342632 0.116031738 0.116460399 0.117148658 0.119416194 0.122753697 0.125593397 0.127581177 0.128201922 0.131185118 0.133029104 0.135109844 0.136685950 0.141959790 0.144384793 0.145320018 0.145702807 0.146689471 0.147744694 0.152479901 0.157234817 0.159724205 0.169711955 0.173851991 0.174631569 0.180357518 0.183145990 0.184931241 0.185346828 0.188027641 0.189576529 0.200210774 0.201759520 0.203305142 0.204622733 0.206773377 0.207126619 0.208879768 0.209524728 0.212241317 0.215091085 0.216471779 0.224680318 0.231448557 0.232378885 0.232969592 0.234903065 0.243981336 0.248002731 0.254237040 0.254983287 0.256667726 0.258687376 0.271367146 0.276173844 0.289387635 0.295199910 0.297081496 0.299203092 0.303826836 0.305847088 0.307519497 0.310767183 0.320018875 0.321771616 0.324636464 0.327635614 0.344559902 0.346341774 0.347119224 0.350462134 0.354663862 0.358730162 0.363835319 0.365124073 0.372652408 0.380199938 0.404545144 0.424778214 0.430029423 0.444298412 0.462700847 0.462987591 0.474025350 0.474770981 0.477886590 0.480052505 0.498018662 0.506399686 0.541110226 0.561195422 0.566712830 0.570413602 0.583215667 0.600148516 0.604173663 0.633124873 0.642904840 0.665263504 0.670273069 0.677581953 0.681284499 0.688276807 0.691411637 0.691775249 0.704240394 0.704744892 0.713594840 0.737068037 0.750678948 0.771570272 0.775825982 0.797855238 0.806191149 0.812295497 0.815157732 0.816408345 0.819495938 0.820332216 0.829192177 0.829618687 0.830763748 0.836881315 0.840503387 0.844564867 0.846339064 0.848636668 0.856428242 0.859255560 0.867333761 0.871737324 0.874894798 0.886488298 0.887697634 0.893589597 0.914741818 0.923900075 0.930844780 0.933620035 0.958344997 0.969116379 0.975822327 0.989117735 0.999612209 1.012915277 1.034009173 1.042602748 1.049151276 1.055208289 1.072731444 1.084181369 1.088640329 1.109989673 1.110584525 1.116093280 1.122411298 1.123318261 1.134001475 1.142184279 1.161141941 1.168704306 1.172569011 1.173187623 1.200371998 1.203656607 1.214530999 1.247008271 1.255883031 1.291776734 1.295702767 1.314065294 1.326099079 1.326428358 1.330135871 1.334406503 1.335236751 1.340923583 1.345756103 1.362011390 1.377291450 1.378848878 1.380938664 1.381565002 1.557330089 1.663182767 1.671876679</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">22</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.03349221" y3="-0.94054316" z3="-0.5774681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.74910974" y3="-1.92654185" z3="-1.38804348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.22336169" y3="-0.97461728" z3="-1.26490011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.87013093" y3="1.4873173" z3="-0.98055228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38384278" y3="0.31879384" z3="-0.41959664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72642247" y3="2.68521678" z3="-1.2076099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05835517" y3="2.73035858" z3="-0.83460306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35903828" y3="4.9729969" z3="-0.57383872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84211928" y3="3.79314094" z3="-1.05448859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70731955" y3="5.84528739" z3="-0.46317438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21302652" y3="1.52335662" z3="-1.70152506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.20249904" y3="0.35011298" z3="0.26336964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.81325145" y3="0.32817855" z3="-0.63254413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67722505" y3="0.68417957" z3="0.25311464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.80453675" y3="-0.93127228" z3="-1.47149636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07844717" y3="-2.46901905" z3="-1.32759845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84588245" y3="-5.32720348" z3="-6.39660173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60579896" y3="-4.91925871" z3="-5.41056055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97353833" y3="-3.84716507" z3="-2.90559954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59079049" y3="-3.54275418" z3="-5.22166218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33512845" y3="-5.77540148" z3="-4.34075351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03326516" y3="-5.23333988" z3="-3.09694382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28413432" y3="-2.9765459" z3="-3.97511227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81070347" y3="-2.85323553" z3="-6.04045997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37239091" y3="-6.86017185" z3="-4.46890157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.85658746" y3="-5.88892684" z3="-2.23985349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59716634" y3="-3.33180878" z3="-1.63940943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.42408955" y3="-3.80443267" z3="-0.91335765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.80307572" y3="-4.7807863" z3="-1.22860504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44955234" y3="-3.57767466" z3="0.55016728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.56270611" y3="-3.24283162" z3="3.3296607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.88099449" y3="-4.62482522" z3="1.37472636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08115987" y3="-2.35907293" z3="1.13108193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13875825" y3="-2.19485907" z3="2.51195266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.9298283" y3="-4.46102631" z3="2.75698315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.1447544" y3="-5.58998094" z3="0.93273803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2330384" y3="-1.50576533" z3="0.52724346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15914254" y3="-1.23315113" z3="2.93910538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.23627274" y3="-5.29772167" z3="3.39056107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.59569447" y3="-3.11651834" z3="4.4157486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24640227" y3="-1.64095805" z3="-3.89509285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46130954" y3="-1.28574205" z3="-2.98649591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3888892" y3="3.59693893" z3="-1.29098324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1544571" y3="-2.82028872" z3="-1.69064275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.96086293" y3="-3.06425713" z3="-0.57525262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08764754" y3="-2.27615672" z3="0.44047557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80423918" y3="-0.75776044" z3="0.89292319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.07640717" y3="-0.40923889" z3="-0.42533446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49348574" y3="0.54026615" z3="1.0990866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.57322239" y3="-1.1693107" z3="2.54715282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.52890298" y3="-4.25592119" z3="-0.4627844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.29984184" y3="-4.54993357" z3="0.69206426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.6200934" y3="-0.28456748" z3="-1.42202471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.60755472" y3="0.53505473" z3="-0.20863236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.82392327" y3="-1.22098845" z3="-0.48364287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.90479877" y3="0.76490638" z3="0.19874283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.76763293" y3="0.24866491" z3="1.87455061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98707531" y3="1.47472407" z3="1.42416495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.01732348" y3="-0.26277426" z3="3.00326171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.37338905" y3="-1.9249569" z3="2.4575085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.80416549" y3="-1.55868726" z3="3.2458665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.2070169" y3="-3.92325982" z3="0.72030887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.7112146" y3="-4.39501541" z3="1.60959847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.58467856" y3="-5.60606944" z3="0.59418733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36666995" y3="-2.18237838" z3="-0.10509874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15751942" y3="-3.23049976" z3="-1.01208186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45209247" y3="-4.36870318" z3="-0.64020576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96855609" y3="-4.45605702" z3="0.66011822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18909561" y3="-3.45041189" z3="1.5968342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8806345" y3="-2.31122647" z3="1.20448487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50452892" y3="-3.12809079" z3="-2.04347531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.2512039" y3="-5.16631117" z3="-1.3563001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.1672213" y3="-5.6189074" z3="1.0477009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79195325" y3="-3.55751164" z3="2.60701141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.0275458" y3="-1.49891947" z3="1.91844902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52045318" y3="3.97496367" z3="-0.29382527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87231299" y3="3.67864244" z3="-0.40805466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.30913415" y3="2.98690379" z3="-1.53282948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.44142921" y3="2.63913537" z3="-2.56477789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.09517032" y3="2.95449366" z3="-2.44089845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1518042" y3="4.45751369" z3="0.61475384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57999389" y3="3.9387151" z3="0.37928553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.70949486" y3="2.56270094" z3="-1.60762531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.82108874" y3="2.10958362" z3="-3.43919157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.59638803" y3="2.66299854" z3="-3.23237505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.03192167" y3="-5.84717905" z3="2.22882742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.66842724" y3="-6.28446189" z3="0.15900632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.06149968" y3="1.93463475" z3="-2.58410481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43796376" y3="2.84273763" z3="-0.67669655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.77428166" y3="0.19137052" z3="-1.85778506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07666323" y3="1.43036799" z3="-1.75408396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98471848" y3="0.13013617" z3="-2.60192502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47277221" y3="1.23857764" z3="-3.24824184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.51536179" y3="-0.82515991" z3="-2.66074597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40194427" y3="1.17897394" z3="-3.8217551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59130115" y3="2.55078292" z3="-2.46528841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75636805" y3="2.4578403" z3="-3.18833041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04540794" y3="3.49583782" z3="-2.44087345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12930995" y3="3.3329544" z3="-3.72799689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57047269" y3="3.94198755" z3="-0.26402763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71732378" y3="5.08136051" z3="-0.17612223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89027092" y3="4.04980656" z3="0.25760671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.34993561" y3="5.23289688" z3="0.78451199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54259386" y3="3.17439941" z3="0.24292679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36762439" y3="5.28959701" z3="1.18102634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22690957" y3="6.29589139" z3="0.36091244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51620396" y3="6.37625015" z3="0.82543626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.56482359" y3="7.1660018" z3="0.40849258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.89601565" y3="7.31400998" z3="1.24040367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41345557" y3="-3.63663608" z3="-2.9404563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.6557886" y3="-4.68682343" z3="-2.71655125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26033961" y3="-3.20722125" z3="-3.50832731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.5329051" y3="-3.61594871" z3="-3.60157637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66416068" y3="-1.41368333" z3="-1.923335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45852592" y3="-0.77282728" z3="-2.3507756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.2905049" y3="-0.93154257" z3="-1.00742728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.83289909" y3="-1.42405558" z3="-2.64686081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0335,-.9405,-.5775;6.7491,-1.9265,-1.388;6.2234,-.9746,-1.2649;4.8701,1.4873,-.9806;4.3838,.3188,-.4196;2.7264,2.6852,-1.2076;4.0584,2.7304,-.8346;2.359,4.973,-.5738;1.8421,3.7931,-1.0545;1.7073,5.8453,-.4632;2.213,1.5234,-1.7015;3.2025,.3501,.2634;1.8133,.3282,-.6325;.6772,.6842,.2531;1.8045,-.9313,-1.4715;1.0784,-2.469,-1.3276;1.8459,-5.3272,-6.3966;1.6058,-4.9193,-5.4106;.9735,-3.8472,-2.9056;1.5908,-3.5428,-5.2217;1.3351,-5.7754,-4.3408;1.0333,-5.2333,-3.0969;1.2841,-2.9765,-3.9751;1.8107,-2.8532,-6.0405;1.3724,-6.8602,-4.4689;.8566,-5.8889,-2.2399;.5972,-3.3318,-1.6394;-.4241,-3.8044,-.9134;-.8031,-4.7808,-1.2286;-.4496,-3.5777,.5502;-.5627,-3.2428,3.3297;-.881,-4.6248,1.3747;-.0812,-2.3591,1.1311;-.1388,-2.1949,2.512;-.9298,-4.461,2.757;-1.1448,-5.59,.9327;.233,-1.5058,.5272;.1591,-1.2332,2.9391;-1.2363,-5.2977,3.3906;-.5957,-3.1165,4.4157;1.2464,-1.641,-3.8951;1.4613,-1.2857,-2.9865;.3889,3.5969,-1.291;-2.1545,-2.8203,-1.6906;-2.9609,-3.0643,-.5753;-3.0876,-2.2762,.4405;-3.8042,-.7578,.8929;-5.0764,-.4092,-.4253;-2.4935,.5403,1.0991;-4.5732,-1.1693,2.5472;-3.5289,-4.2559,-.4628;-4.2998,-4.5499,.6921;-4.6201,-.2846,-1.422;-5.6076,.5351,-.2086;-5.8239,-1.221,-.4836;-1.9048,.7649,.1987;-1.7676,.2487,1.8746;-2.9871,1.4747,1.4242;-5.0173,-.2628,3.0033;-5.3734,-1.925,2.4575;-3.8042,-1.5587,3.2459;-5.207,-3.9233,.7203;-3.7112,-4.395,1.6096;-4.5847,-5.6061,.5942;4.3667,-2.1824,-.1051;4.1575,-3.2305,-1.0121;3.4521,-4.3687,-.6402;2.9686,-4.4561,.6601;3.1891,-3.4504,1.5968;3.8806,-2.3112,1.2045;4.5045,-3.1281,-2.0435;3.2512,-5.1663,-1.3563;2.1672,-5.6189,1.0477;2.792,-3.5575,2.607;4.0275,-1.4989,1.9184;-.5205,3.975,-.2938;-1.8723,3.6786,-.4081;-2.3091,2.9869,-1.5328;-1.4414,2.6391,-2.5648;-.0952,2.9545,-2.4409;-.1518,4.4575,.6148;-2.58,3.9387,.3793;-3.7095,2.5627,-1.6076;-1.8211,2.1096,-3.4392;.5964,2.663,-3.2324;2.0319,-5.8472,2.2288;1.6684,-6.2845,.159;-4.0615,1.9346,-2.5841;-4.438,2.8427,-.6767;6.7743,.1914,-1.8578;6.0767,1.4304,-1.7541;7.9847,.1301,-2.6019;8.4728,1.2386,-3.2482;8.5154,-.8252,-2.6607;9.4019,1.179,-3.8218;6.5913,2.5508,-2.4653;7.7564,2.4578,-3.1883;6.0454,3.4958,-2.4409;8.1293,3.333,-3.728;4.5705,3.942,-.264;3.7173,5.0814,-.1761;5.8903,4.0498,.2576;6.3499,5.2329,.7845;6.5426,3.1744,.2429;7.3676,5.2896,1.181;4.2269,6.2959,.3609;5.5162,6.3763,.8254;3.5648,7.166,.4085;5.896,7.314,1.2404;-2.4135,-3.6366,-2.9405;-2.6558,-4.6868,-2.7166;-3.2603,-3.2072,-3.5083;-1.5329,-3.6159,-3.6016;-1.6642,-1.4137,-1.9233;-2.4585,-.7728,-2.3508;-1.2905,-.9315,-1.0074;-.8329,-1.4241,-2.6469;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661959604042</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004154955073 0.000548450130 0.031550194549 0.005337292984</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037679838 -0.002546727 0.000068520 0.000165845 0.000221765 0.000241984 0.000315812 0.000380951 0.000412118 0.000495764 0.000633648 0.000757780 0.000769186 0.000827538 0.000880453 0.000949577 0.000994726 0.001175431 0.001226629 0.001267560 0.001322601 0.001410319 0.001415351 0.001484685 0.001690765 0.001750052 0.001906548 0.002146130 0.002536083 0.002995629 0.003164489 0.003349812 0.003477063 0.003983478 0.004119884 0.004455121 0.004720769 0.004839065 0.005550677 0.005915752 0.006026947 0.006568498 0.006810978 0.007131834 0.007302165 0.007846163 0.008162959 0.008677926 0.009198224 0.009774354 0.010032939 0.010278598 0.010487881 0.012531976 0.012756153 0.013303601 0.014244394 0.014602232 0.014926421 0.015289848 0.015782488 0.016148316 0.016402090 0.016922331 0.017397882 0.018260073 0.018709606 0.020291668 0.021043052 0.022196573 0.022999933 0.023207203 0.024517864 0.025210580 0.025951850 0.026477187 0.026726047 0.027760861 0.029521245 0.029779820 0.030413870 0.031016471 0.031902181 0.032691339 0.034594994 0.037282133 0.037879688 0.038787431 0.039189134 0.040237028 0.040782298 0.043410767 0.045259433 0.046124568 0.047617282 0.049669399 0.050654543 0.050769745 0.051323914 0.051557319 0.051799856 0.052281427 0.052386759 0.052541676 0.053797281 0.054711265 0.056492190 0.056837295 0.056964673 0.057212743 0.057589012 0.058421117 0.059207971 0.059658706 0.060291682 0.060481392 0.061437014 0.061685509 0.064548327 0.064608802 0.065527815 0.067696737 0.067998152 0.069221291 0.071592930 0.072647437 0.076364327 0.076931001 0.080012977 0.080957789 0.082081243 0.086301542 0.089451823 0.090800314 0.092587271 0.092838017 0.094167985 0.095122442 0.095288612 0.095878058 0.096372637 0.096857388 0.098039218 0.098425399 0.099426598 0.099554502 0.100465432 0.101248322 0.101962581 0.102658767 0.103759593 0.104300374 0.105360519 0.106521851 0.107324878 0.108149319 0.108683686 0.110121653 0.112552530 0.113344111 0.116032453 0.116460395 0.117148597 0.119416749 0.122753850 0.125593473 0.127581064 0.128202373 0.131185778 0.133030287 0.135110404 0.136685770 0.141959784 0.144385312 0.145345124 0.145703152 0.146689738 0.147745002 0.152479889 0.157234821 0.159724229 0.169712087 0.173851987 0.174631803 0.180357510 0.183146607 0.184937322 0.185351826 0.188027584 0.189576229 0.200208448 0.201759450 0.203305926 0.204622609 0.206773377 0.207126620 0.208879814 0.209524890 0.212241372 0.215091104 0.216471583 0.224680360 0.231448580 0.232378884 0.232969840 0.234903175 0.243981402 0.248004615 0.254237234 0.254983435 0.256667722 0.258687350 0.271367198 0.276174534 0.289387609 0.295199955 0.297092698 0.299203302 0.303827224 0.305847090 0.307519644 0.310855304 0.320018892 0.321771724 0.324648312 0.327638380 0.344560280 0.346377964 0.347523321 0.350477602 0.354664404 0.358749913 0.363835647 0.366882866 0.372814996 0.380202222 0.404547821 0.424803607 0.430029725 0.444299501 0.462704333 0.462987729 0.474026462 0.474808572 0.477886596 0.480061886 0.498018685 0.506409843 0.541116053 0.561213442 0.566712888 0.570425776 0.583216662 0.600760241 0.604184289 0.633195000 0.642907779 0.665263787 0.670277026 0.678908151 0.681284519 0.688561176 0.691510591 0.692258675 0.704240432 0.704745216 0.713598916 0.737068218 0.750678951 0.771570320 0.775826042 0.797855230 0.806604976 0.812626290 0.815191769 0.816408826 0.819504687 0.820333521 0.829254557 0.829762702 0.830806141 0.838146921 0.840510340 0.844614836 0.846659856 0.848638526 0.856432017 0.859255566 0.867333898 0.871738845 0.874895643 0.886489677 0.887697601 0.893589681 0.914743671 0.923900077 0.930846809 0.933623763 0.958344997 0.969117266 0.975822358 0.989117970 0.999612213 1.012915364 1.034009270 1.042602747 1.049151270 1.055208294 1.072733814 1.084181387 1.088640328 1.109989673 1.110584525 1.116093400 1.122411302 1.123318260 1.134001605 1.142185572 1.161142448 1.168704305 1.172569028 1.173187623 1.200372013 1.203656790 1.214542040 1.247017009 1.256154630 1.291776820 1.295702885 1.314066086 1.326100083 1.326428975 1.330135859 1.334406616 1.335291867 1.340923703 1.345756417 1.362011302 1.377294881 1.378849105 1.380938661 1.381565157 1.557331101 1.663200479 1.671876826</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">23</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0311322" y3="-0.94072847" z3="-0.5793087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.74693336" y3="-1.926863" z3="-1.38934863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.22126202" y3="-0.97487971" z3="-1.2663269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.86862894" y3="1.48726307" z3="-0.9817322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.38164522" y3="0.31868627" z3="-0.42145293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72561586" y3="2.68648934" z3="-1.20786749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05757434" y3="2.73063878" z3="-0.8348959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35902439" y3="4.97331532" z3="-0.57040555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84156951" y3="3.79424845" z3="-1.052427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70751687" y3="5.84553447" z3="-0.45802068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.2119193" y3="1.52553138" z3="-1.70364773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19989251" y3="0.35013972" z3="0.26085212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.81122629" y3="0.32946692" z3="-0.63604168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67460835" y3="0.68549291" z3="0.24892418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.80274112" y3="-0.92953827" z3="-1.47562578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07847724" y3="-2.46860466" z3="-1.3294774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84265321" y3="-5.3307305" z3="-6.39679929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60344233" y3="-4.92212453" z3="-5.41082913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97318887" y3="-3.84832007" z3="-2.90607698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58780603" y3="-3.54549358" z3="-5.22302653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33447031" y3="-5.77752069" z3="-4.34002858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03357072" y3="-5.23461388" z3="-3.09636602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28218353" y3="-2.97844317" z3="-3.97662445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8063629" y3="-2.85648997" z3="-6.04258837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37227918" y3="-6.86236742" z3="-4.46732419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.85816257" y3="-5.8896074" z3="-2.23858685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59769792" y3="-3.33209535" z3="-1.63999786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.42281555" y3="-3.80455503" z3="-0.91245738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.80090084" y3="-4.78180943" z3="-1.22604023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44649662" y3="-3.57637683" z3="0.55088304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.55621611" y3="-3.23842397" z3="3.33001378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.87408912" y3="-4.62353424" z3="1.37723377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08067848" y3="-2.35603799" z3="1.12963478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13632466" y3="-2.19036964" z3="2.51036543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.9212038" y3="-4.45816892" z3="2.75937121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.13625746" y3="-5.58978658" z3="0.93679152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.22952198" y3="-1.50236475" z3="0.52420965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15984935" y3="-1.2274052" z3="2.93578941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.22459966" y3="-5.29482033" z3="3.39437957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.58783436" y3="-3.11088342" z3="4.41597441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24377073" y3="-1.64281304" z3="-3.89775056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45922014" y3="-1.28648335" z3="-2.98970154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38806297" y3="3.59877503" z3="-1.28777673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15408039" y3="-2.82388474" z3="-1.68857104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95864362" y3="-3.06595684" z3="-0.57074839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08334875" y3="-2.27768293" z3="0.44580472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80764131" y3="-0.75536608" z3="0.88767458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.06835091" y3="-0.40836269" z3="-0.44230581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49486193" y3="0.53910632" z3="1.1050718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.58927439" y3="-1.16308485" z3="2.53783576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.52597376" y3="-4.2572567" z3="-0.45705932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.29385463" y3="-4.55190396" z3="0.69959005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.60638313" y3="-0.28857077" z3="-1.43664027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.59478995" y3="0.53778853" z3="-0.2287054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.81794287" y3="-1.2178885" z3="-0.49992958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.87520199" y3="0.75281336" z3="0.21363342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.78748664" y3="0.24772468" z3="1.90610081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99291718" y3="1.47933824" z3="1.41250759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.02709908" y3="-0.26088071" z3="2.99667233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.38670381" y3="-1.92036946" z3="2.44493059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.82211983" y3="-1.5536618" z3="3.22461301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.20239902" y3="-3.92724108" z3="0.72891479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.70353037" y3="-4.39459993" z3="1.61548182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57641618" y3="-5.60870902" z3="0.60341972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36454353" y3="-2.18270691" z3="-0.10698507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15671687" y3="-3.23133973" z3="-1.01369637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45271393" y3="-4.3703179" z3="-0.64153688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.96927193" y3="-4.45793845" z3="0.65880174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18816086" y3="-3.45160961" z3="1.5951515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.87820379" y3="-2.31161982" z3="1.20249011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5038692" y3="-3.12889648" z3="-2.04503755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.25301818" y3="-5.16846665" z3="-1.35735943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.1699433" y3="-5.62197827" z3="1.04677468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79100001" y3="-3.55886785" z3="2.60531406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.02390688" y3="-1.49886326" z3="1.91618586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.52000646" y3="3.97587657" z3="-0.2891617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87221706" y3="3.6809912" z3="-0.40255736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.31086156" y3="2.99216695" z3="-1.52827298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.444407" y3="2.64519707" z3="-2.56159028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.09755207" y3="2.95831698" z3="-2.43807409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.15011954" y3="4.45666831" z3="0.61975167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57904993" y3="3.94091576" z3="0.38554316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.71252016" y3="2.5724341" z3="-1.6038962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.82557282" y3="2.11808275" z3="-3.43676735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.59318607" y3="2.66699591" z3="-3.23030883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.0365118" y3="-5.85110738" z3="2.22791478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.67074947" y3="-6.28760744" z3="0.1583585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.07014825" y3="1.95862395" z3="-2.58959084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43698529" y3="2.84302223" z3="-0.66529424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.7726208" y3="0.19106796" z3="-1.85885259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07532369" y3="1.43021323" z3="-1.75495967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.9832285" y3="0.12973053" z3="-2.60271272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.471706" y3="1.23823454" z3="-3.2485995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.51365099" y3="-0.82567911" z3="-2.66167976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40098796" y3="1.17855635" z3="-3.8219263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.59042199" y3="2.55072387" z3="-2.46567746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75561592" y3="2.45767961" z3="-3.18849392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04476029" y3="3.49591184" z3="-2.44107201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1289114" y3="3.33284676" z3="-3.72782926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57032011" y3="3.94136778" z3="-0.26298734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71757092" y3="5.08089922" z3="-0.17340845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89035519" y3="4.04817635" z3="0.25826366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35065852" y3="5.23057257" z3="0.78616299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54238708" y3="3.17257858" z3="0.24243207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36854682" y3="5.28652041" z3="1.18226884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22779789" y3="6.29470285" z3="0.364655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.517349" y3="6.37417372" z3="0.82860787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.56601668" y3="7.16497408" z3="0.41344415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.8976911" y3="7.31139744" z3="1.2442944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41422149" y3="-3.64295588" z3="-2.93649155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65465746" y3="-4.69307374" z3="-2.71065033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26247547" y3="-3.21566717" z3="-3.50376834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53473173" y3="-3.62224037" z3="-3.59910264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66512381" y3="-1.41768797" z3="-1.92619645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45899571" y3="-0.78037442" z3="-2.35957691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.29527076" y3="-0.93091288" z3="-1.01133207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.83171066" y3="-1.42972104" z3="-2.64716866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0311,-.9407,-.5793;6.7469,-1.9269,-1.3893;6.2213,-.9749,-1.2663;4.8686,1.4873,-.9817;4.3816,.3187,-.4215;2.7256,2.6865,-1.2079;4.0576,2.7306,-.8349;2.359,4.9733,-.5704;1.8416,3.7942,-1.0524;1.7075,5.8455,-.458;2.2119,1.5255,-1.7036;3.1999,.3501,.2609;1.8112,.3295,-.636;.6746,.6855,.2489;1.8027,-.9295,-1.4756;1.0785,-2.4686,-1.3295;1.8427,-5.3307,-6.3968;1.6034,-4.9221,-5.4108;.9732,-3.8483,-2.9061;1.5878,-3.5455,-5.223;1.3345,-5.7775,-4.34;1.0336,-5.2346,-3.0964;1.2822,-2.9784,-3.9766;1.8064,-2.8565,-6.0426;1.3723,-6.8624,-4.4673;.8582,-5.8896,-2.2386;.5977,-3.3321,-1.64;-.4228,-3.8046,-.9125;-.8009,-4.7818,-1.226;-.4465,-3.5764,.5509;-.5562,-3.2384,3.33;-.8741,-4.6235,1.3772;-.0807,-2.356,1.1296;-.1363,-2.1904,2.5104;-.9212,-4.4582,2.7594;-1.1363,-5.5898,.9368;.2295,-1.5024,.5242;.1598,-1.2274,2.9358;-1.2246,-5.2948,3.3944;-.5878,-3.1109,4.416;1.2438,-1.6428,-3.8978;1.4592,-1.2865,-2.9897;.3881,3.5988,-1.2878;-2.1541,-2.8239,-1.6886;-2.9586,-3.066,-.5707;-3.0833,-2.2777,.4458;-3.8076,-.7554,.8877;-5.0684,-.4084,-.4423;-2.4949,.5391,1.1051;-4.5893,-1.1631,2.5378;-3.526,-4.2573,-.4571;-4.2939,-4.5519,.6996;-4.6064,-.2886,-1.4366;-5.5948,.5378,-.2287;-5.8179,-1.2179,-.4999;-1.8752,.7528,.2136;-1.7875,.2477,1.9061;-2.9929,1.4793,1.4125;-5.0271,-.2609,2.9967;-5.3867,-1.9204,2.4449;-3.8221,-1.5537,3.2246;-5.2024,-3.9272,.7289;-3.7035,-4.3946,1.6155;-4.5764,-5.6087,.6034;4.3645,-2.1827,-.107;4.1567,-3.2313,-1.0137;3.4527,-4.3703,-.6415;2.9693,-4.4579,.6588;3.1882,-3.4516,1.5952;3.8782,-2.3116,1.2025;4.5039,-3.1289,-2.045;3.253,-5.1685,-1.3574;2.1699,-5.622,1.0468;2.791,-3.5589,2.6053;4.0239,-1.4989,1.9162;-.52,3.9759,-.2892;-1.8722,3.681,-.4026;-2.3109,2.9922,-1.5283;-1.4444,2.6452,-2.5616;-.0976,2.9583,-2.4381;-.1501,4.4567,.6198;-2.579,3.9409,.3855;-3.7125,2.5724,-1.6039;-1.8256,2.1181,-3.4368;.5932,2.667,-3.2303;2.0365,-5.8511,2.2279;1.6707,-6.2876,.1584;-4.0701,1.9586,-2.5896;-4.437,2.843,-.6653;6.7726,.1911,-1.8589;6.0753,1.4302,-1.755;7.9832,.1297,-2.6027;8.4717,1.2382,-3.2486;8.5137,-.8257,-2.6617;9.401,1.1786,-3.8219;6.5904,2.5507,-2.4657;7.7556,2.4577,-3.1885;6.0448,3.4959,-2.4411;8.1289,3.3328,-3.7278;4.5703,3.9414,-.263;3.7176,5.0809,-.1734;5.8904,4.0482,.2583;6.3507,5.2306,.7862;6.5424,3.1726,.2424;7.3685,5.2865,1.1823;4.2278,6.2947,.3647;5.5173,6.3742,.8286;3.566,7.165,.4134;5.8977,7.3114,1.2443;-2.4142,-3.643,-2.9365;-2.6547,-4.6931,-2.7107;-3.2625,-3.2157,-3.5038;-1.5347,-3.6222,-3.5991;-1.6651,-1.4177,-1.9262;-2.459,-.7804,-2.3596;-1.2953,-.9309,-1.0113;-.8317,-1.4297,-2.6472;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661964732710</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006507086476 0.000738889082 0.022937155110 0.005336886004</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037685800 -0.003560758 0.000068573 0.000169429 0.000228768 0.000242053 0.000315792 0.000381308 0.000413586 0.000497882 0.000633696 0.000758361 0.000770063 0.000829751 0.000880410 0.000952782 0.001016032 0.001175521 0.001227736 0.001276223 0.001352513 0.001411347 0.001419071 0.001486440 0.001694879 0.001750553 0.001911251 0.002146154 0.002624221 0.002999609 0.003204490 0.003350073 0.003695876 0.003989953 0.004228958 0.004608866 0.004726471 0.004934970 0.005555126 0.005927022 0.006287722 0.006569714 0.006838808 0.007256880 0.007575310 0.007914060 0.008256481 0.008963129 0.009227357 0.009991206 0.010067607 0.010437393 0.010488402 0.012540864 0.012760416 0.013316937 0.014245432 0.014602238 0.014930628 0.015289911 0.015784074 0.016149905 0.016403857 0.017024577 0.017419399 0.018273273 0.018823645 0.020291676 0.021045145 0.022196751 0.023000436 0.023207216 0.024520044 0.025253426 0.025952381 0.026477919 0.026726358 0.027760851 0.029513652 0.029772800 0.030413918 0.031018141 0.031938017 0.032695739 0.034967432 0.037483746 0.038061845 0.038851409 0.039244820 0.040264510 0.040791209 0.043476084 0.045259515 0.046124613 0.047688998 0.049669455 0.050664819 0.051271702 0.051329425 0.051557318 0.051799944 0.052281430 0.052386758 0.052541806 0.053797722 0.054711896 0.056492255 0.056837356 0.056965729 0.057214263 0.057592101 0.058431700 0.059209985 0.059708862 0.060320329 0.060493034 0.061437118 0.061687223 0.064548833 0.064611605 0.065527778 0.067697402 0.068022379 0.069241668 0.071592926 0.072647447 0.076364432 0.076931528 0.080017955 0.080970622 0.082081244 0.086301946 0.089451834 0.090800270 0.092587815 0.092838172 0.094168719 0.095123061 0.095291252 0.095879342 0.096373915 0.096857609 0.098085394 0.098424549 0.099426233 0.099554419 0.100685506 0.101263023 0.101962534 0.102664481 0.103796030 0.104333421 0.105544984 0.106537291 0.107324749 0.108207185 0.108688058 0.110121647 0.112552615 0.113344740 0.116033181 0.116460380 0.117148681 0.119421146 0.122755260 0.125595682 0.127580842 0.128202877 0.131191407 0.133031935 0.135110706 0.136685629 0.141959779 0.144389328 0.145520620 0.145712421 0.146695211 0.147798462 0.152479826 0.157234800 0.159725692 0.169712214 0.173851869 0.174632457 0.180357914 0.183149390 0.185030899 0.185425964 0.188027930 0.189623957 0.200323935 0.201764720 0.203306828 0.204623925 0.206773478 0.207126628 0.208879883 0.209525022 0.212241631 0.215091105 0.216472146 0.224680500 0.231448647 0.232378897 0.232970003 0.234903326 0.243981675 0.248006296 0.254237540 0.254983999 0.256667720 0.258687662 0.271367273 0.276175539 0.289387624 0.295200286 0.297093817 0.299205684 0.303829629 0.305847129 0.307519705 0.310896169 0.320019170 0.321771742 0.324656224 0.327641726 0.344562178 0.346394042 0.347904180 0.350497262 0.354664996 0.358769748 0.363835738 0.367786310 0.374940855 0.380240008 0.404561371 0.424814467 0.430030880 0.444300569 0.462721455 0.462987836 0.474069606 0.474810898 0.477886615 0.480096803 0.498018726 0.506456135 0.541142286 0.561298112 0.566713327 0.570493190 0.583216671 0.600768316 0.604189903 0.633195489 0.642917803 0.665263819 0.670294583 0.679701400 0.681285339 0.689251395 0.691549628 0.694749606 0.704240590 0.704746979 0.713613650 0.737068957 0.750678966 0.771570447 0.775826270 0.797855389 0.806737422 0.813080252 0.815194401 0.816457693 0.819555399 0.820343175 0.829301173 0.830238821 0.831055033 0.839916943 0.840559804 0.844701876 0.846681581 0.848639708 0.856454824 0.859264217 0.867334132 0.871743806 0.874898659 0.886490026 0.887697860 0.893590107 0.914754922 0.923900098 0.930852638 0.933634220 0.958345023 0.969118911 0.975822657 0.989117992 0.999612213 1.012915363 1.034009405 1.042602776 1.049151294 1.055208298 1.072738383 1.084181413 1.088640338 1.109989675 1.110584528 1.116093427 1.122411308 1.123318262 1.134001709 1.142185992 1.161142563 1.168704326 1.172569054 1.173187651 1.200372102 1.203657654 1.214551344 1.247050232 1.257134276 1.291776999 1.295703477 1.314069186 1.326102817 1.326430535 1.330136017 1.334406979 1.335517544 1.340923987 1.345756426 1.362011869 1.377300335 1.378849441 1.380938674 1.381565451 1.557334616 1.663271726 1.671877895</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">24</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.02824576" y3="-0.94099642" z3="-0.58145328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.74430546" y3="-1.92733898" z3="-1.39069965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.21874092" y3="-0.97527254" z3="-1.26787738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.86684413" y3="1.48714024" z3="-0.98310641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37896867" y3="0.31850722" z3="-0.42367319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72465526" y3="2.68799977" z3="-1.20821709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05665479" y3="2.73092055" z3="-0.83526836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35917002" y3="4.973779" z3="-0.56644184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.841023" y3="3.79568498" z3="-1.05015684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70794708" y3="5.84595997" z3="-0.45204621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21044353" y3="1.52807696" z3="-1.7061691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19663756" y3="0.35009225" z3="0.25776524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.80884662" y3="0.33072692" z3="-0.6404961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67140405" y3="0.68625174" z3="0.24374527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.80085135" y3="-0.92765158" z3="-1.48093832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07935998" y3="-2.4683661" z3="-1.33137255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.8386255" y3="-5.33542996" z3="-6.39699069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60050517" y3="-4.92591835" z3="-5.41112471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97308893" y3="-3.84980821" z3="-2.90663229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58427443" y3="-3.54911176" z3="-5.2248029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33352809" y3="-5.78034722" z3="-4.33899517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03397654" y3="-5.23628185" z3="-3.09551997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28009465" y3="-2.98085467" z3="-3.97855047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80126577" y3="-2.86082411" z3="-6.04541651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37182249" y3="-6.86531285" z3="-4.46515184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.8600568" y3="-5.89050782" z3="-2.23682668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59889312" y3="-3.33257266" z3="-1.64045409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41962087" y3="-3.8055669" z3="-0.91076775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.79770477" y3="-4.78328204" z3="-1.22280919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44255734" y3="-3.5745017" z3="0.55201959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.54775697" y3="-3.23259227" z3="3.3307959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.86541967" y3="-4.62177476" z3="1.38079964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07987218" y3="-2.35186653" z3="1.12803641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13308364" y3="-2.1842642" z3="2.50862075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.91023019" y3="-4.45440174" z3="2.76282713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.12535124" y3="-5.58962187" z3="0.942396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.22571999" y3="-1.49794378" z3="0.52049444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16057928" y3="-1.21949138" z3="2.93182412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.20988485" y3="-5.29105082" z3="3.39973805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.57764853" y3="-3.10347646" z3="4.4166494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24118321" y3="-1.64518203" z3="-3.90133155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45680478" y3="-1.28734145" z3="-2.99392341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38716001" y3="3.60131743" z3="-1.28421288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15488497" y3="-2.82711896" z3="-1.68763141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95731907" y3="-3.06829076" z3="-0.56868848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08505497" y3="-2.27582435" z3="0.44386207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80766776" y3="-0.75467159" z3="0.88188029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.0577989" y3="-0.40554428" z3="-0.45758875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49358421" y3="0.53694089" z3="1.11311418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.60378963" y3="-1.16173957" z3="2.52372163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.52062306" y3="-4.26178763" z3="-0.44945501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.28602974" y3="-4.55458403" z3="0.70926564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.58707078" y3="-0.28936954" z3="-1.44871817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.58554663" y3="0.5422784" z3="-0.25164256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.80935292" y3="-1.21322877" z3="-0.52184689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.88396433" y3="0.75555629" z3="0.22876964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.78990591" y3="0.24402088" z3="1.90190437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98563764" y3="1.47425863" z3="1.42320931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.04270427" y3="-0.25503713" z3="2.97752196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.40661957" y3="-1.91293045" z3="2.42634234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.84448008" y3="-1.55659607" z3="3.22347229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19564596" y3="-3.93153013" z3="0.73880791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.69449999" y3="-4.39395489" z3="1.62388233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.56681706" y3="-5.61220247" z3="0.61612134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36190886" y3="-2.18311286" z3="-0.10919389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15572821" y3="-3.23237791" z3="-1.015572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45348301" y3="-4.37232689" z3="-0.64305141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97015205" y3="-4.460264" z3="0.65730903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18698997" y3="-3.45306746" z3="1.59319916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8751899" y3="-2.31207201" z3="1.20014161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50308308" y3="-3.12988741" z3="-2.04683926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.25525563" y3="-5.1711526" z3="-1.35854225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.17330401" y3="-5.62580658" z3="1.04579957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78979398" y3="-3.5605179" z3="2.6033354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.01940392" y3="-1.49873858" z3="1.91349137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51928868" y3="3.97725755" z3="-0.283606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87207224" y3="3.68472523" z3="-0.39631176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3129378" y3="2.99958995" z3="-1.52349677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.44789847" y3="2.65284135" z3="-2.55808998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.10040688" y3="2.96347921" z3="-2.43520843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.147707" y3="4.45552368" z3="0.62602657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57767557" y3="3.94382842" z3="0.39327546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.71560541" y3="2.58342796" z3="-1.59921006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.8308486" y3="2.12819095" z3="-3.43401834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.5892404" y3="2.67251723" z3="-3.22860277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.04243758" y3="-5.85622047" z3="2.22703189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.67342488" y3="-6.29134951" z3="0.15766058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.07288326" y3="1.96782713" z3="-2.57978633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44077549" y3="2.85772061" z3="-0.66474935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.77072182" y3="0.19061811" z3="-1.85990167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07384199" y3="1.42996378" z3="-1.7558309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98162887" y3="0.1291118" z3="-2.60327559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.47077586" y3="1.237695" z3="-3.24853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.51173307" y3="-0.82646662" z3="-2.66238297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.40027178" y3="1.17790246" z3="-3.82150501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58966829" y3="2.55059536" z3="-2.46584758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75512609" y3="2.45739814" z3="-3.18822361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0443608" y3="3.49598842" z3="-2.44104232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12899604" y3="3.33264122" z3="-3.7270502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57019394" y3="3.94055544" z3="-0.26168751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71797481" y3="5.08032432" z3="-0.1701029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89046551" y3="4.04606989" z3="0.25927239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35149103" y3="5.22756747" z3="0.78859908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54215235" y3="3.17023947" z3="0.2420459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.36957073" y3="5.28253737" z3="1.18436516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22891345" y3="6.29318341" z3="0.36945822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51870292" y3="6.3714896" z3="0.83294826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.56749342" y3="7.16365209" z3="0.4197571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.89963212" y3="7.30799948" z3="1.24973993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41511981" y3="-3.65047068" z3="-2.93272445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65314273" y3="-4.70049201" z3="-2.70319871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26537838" y3="-3.22661024" z3="-3.49980616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53679457" y3="-3.6298564" z3="-3.59682216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66743047" y3="-1.42134566" z3="-1.92950225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46018025" y3="-0.78788137" z3="-2.37060284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.30329326" y3="-0.92859309" z3="-1.01528849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.83055742" y3="-1.43533382" z3="-2.64648158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0282,-.941,-.5815;6.7443,-1.9273,-1.3907;6.2187,-.9753,-1.2679;4.8668,1.4871,-.9831;4.379,.3185,-.4237;2.7247,2.688,-1.2082;4.0567,2.7309,-.8353;2.3592,4.9738,-.5664;1.841,3.7957,-1.0502;1.7079,5.846,-.452;2.2104,1.5281,-1.7062;3.1966,.3501,.2578;1.8088,.3307,-.6405;.6714,.6863,.2437;1.8009,-.9277,-1.4809;1.0794,-2.4684,-1.3314;1.8386,-5.3354,-6.397;1.6005,-4.9259,-5.4111;.9731,-3.8498,-2.9066;1.5843,-3.5491,-5.2248;1.3335,-5.7803,-4.339;1.034,-5.2363,-3.0955;1.2801,-2.9809,-3.9786;1.8013,-2.8608,-6.0454;1.3718,-6.8653,-4.4652;.8601,-5.8905,-2.2368;.5989,-3.3326,-1.6405;-.4196,-3.8056,-.9108;-.7977,-4.7833,-1.2228;-.4426,-3.5745,.552;-.5478,-3.2326,3.3308;-.8654,-4.6218,1.3808;-.0799,-2.3519,1.128;-.1331,-2.1843,2.5086;-.9102,-4.4544,2.7628;-1.1254,-5.5896,.9424;.2257,-1.4979,.5205;.1606,-1.2195,2.9318;-1.2099,-5.2911,3.3997;-.5776,-3.1035,4.4166;1.2412,-1.6452,-3.9013;1.4568,-1.2873,-2.9939;.3872,3.6013,-1.2842;-2.1549,-2.8271,-1.6876;-2.9573,-3.0683,-.5687;-3.0851,-2.2758,.4439;-3.8077,-.7547,.8819;-5.0578,-.4055,-.4576;-2.4936,.5369,1.1131;-4.6038,-1.1617,2.5237;-3.5206,-4.2618,-.4495;-4.286,-4.5546,.7093;-4.5871,-.2894,-1.4487;-5.5855,.5423,-.2516;-5.8094,-1.2132,-.5218;-1.884,.7556,.2288;-1.7899,.244,1.9019;-2.9856,1.4743,1.4232;-5.0427,-.255,2.9775;-5.4066,-1.9129,2.4263;-3.8445,-1.5566,3.2235;-5.1956,-3.9315,.7388;-3.6945,-4.394,1.6239;-4.5668,-5.6122,.6161;4.3619,-2.1831,-.1092;4.1557,-3.2324,-1.0156;3.4535,-4.3723,-.6431;2.9702,-4.4603,.6573;3.187,-3.4531,1.5932;3.8752,-2.3121,1.2001;4.5031,-3.1299,-2.0468;3.2553,-5.1712,-1.3585;2.1733,-5.6258,1.0458;2.7898,-3.5605,2.6033;4.0194,-1.4987,1.9135;-.5193,3.9773,-.2836;-1.8721,3.6847,-.3963;-2.3129,2.9996,-1.5235;-1.4479,2.6528,-2.5581;-.1004,2.9635,-2.4352;-.1477,4.4555,.626;-2.5777,3.9438,.3933;-3.7156,2.5834,-1.5992;-1.8308,2.1282,-3.434;.5892,2.6725,-3.2286;2.0424,-5.8562,2.227;1.6734,-6.2913,.1577;-4.0729,1.9678,-2.5798;-4.4408,2.8577,-.6647;6.7707,.1906,-1.8599;6.0738,1.43,-1.7558;7.9816,.1291,-2.6033;8.4708,1.2377,-3.2485;8.5117,-.8265,-2.6624;9.4003,1.1779,-3.8215;6.5897,2.5506,-2.4658;7.7551,2.4574,-3.1882;6.0444,3.496,-2.441;8.129,3.3326,-3.7271;4.5702,3.9406,-.2617;3.718,5.0803,-.1701;5.8905,4.0461,.2593;6.3515,5.2276,.7886;6.5422,3.1702,.242;7.3696,5.2825,1.1844;4.2289,6.2932,.3695;5.5187,6.3715,.8329;3.5675,7.1637,.4198;5.8996,7.308,1.2497;-2.4151,-3.6505,-2.9327;-2.6531,-4.7005,-2.7032;-3.2654,-3.2266,-3.4998;-1.5368,-3.6299,-3.5968;-1.6674,-1.4213,-1.9295;-2.4602,-.7879,-2.3706;-1.3033,-.9286,-1.0153;-.8306,-1.4353,-2.6465;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661973942606</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006908300691 0.000831815453 0.035685754187 0.005338038178</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037697353 -0.004281268 0.000068797 0.000170859 0.000232832 0.000243069 0.000316576 0.000382523 0.000413743 0.000497972 0.000634497 0.000758389 0.000771353 0.000830978 0.000880681 0.000952727 0.001019239 0.001175512 0.001227739 0.001279334 0.001393037 0.001413521 0.001449415 0.001489492 0.001707398 0.001750661 0.001916472 0.002146728 0.002640312 0.003000187 0.003209419 0.003350199 0.003782590 0.003992337 0.004285565 0.004713685 0.004731047 0.005163670 0.005559335 0.005936666 0.006564295 0.006637801 0.006842629 0.007274968 0.007747790 0.008105203 0.008467450 0.009162399 0.009497599 0.010015649 0.010189031 0.010488195 0.011683235 0.012544120 0.012776249 0.013315597 0.014245301 0.014602437 0.014947200 0.015290050 0.015788889 0.016155750 0.016407184 0.017075529 0.017443286 0.018276660 0.018909712 0.020291676 0.021044857 0.022196879 0.023000372 0.023207204 0.024519777 0.025247694 0.025952283 0.026477949 0.026726308 0.027760853 0.029612276 0.030148222 0.030417442 0.031025535 0.031940730 0.032695366 0.034990942 0.037535122 0.038243690 0.038882247 0.039255841 0.040269328 0.040789936 0.043475687 0.045259552 0.046124617 0.048084630 0.049669595 0.050665266 0.051314468 0.051364677 0.051557320 0.051800129 0.052281434 0.052386765 0.052541837 0.053797668 0.054712244 0.056492257 0.056837396 0.056965861 0.057214463 0.057592742 0.058435044 0.059210702 0.059733729 0.060331953 0.060500298 0.061437478 0.061687105 0.064549219 0.064613430 0.065527788 0.067697952 0.068033684 0.069250419 0.071592981 0.072647467 0.076364708 0.076933197 0.080019900 0.080978580 0.082081269 0.086302759 0.089451828 0.090800299 0.092588985 0.092838332 0.094169916 0.095123254 0.095292339 0.095880299 0.096373803 0.096857656 0.098083161 0.098469400 0.099429266 0.099633955 0.100889490 0.101284993 0.101963732 0.102669994 0.103801856 0.104333568 0.105750346 0.106563136 0.107325293 0.108209987 0.108687841 0.110121755 0.112552633 0.113344714 0.116033572 0.116460372 0.117149199 0.119424386 0.122759653 0.125604223 0.127580713 0.128204549 0.131222725 0.133032143 0.135110667 0.136686135 0.141959841 0.144394121 0.145679912 0.145882806 0.146709453 0.147916050 0.152479739 0.157234861 0.159732901 0.169712631 0.173851848 0.174634114 0.180358624 0.183153363 0.185135114 0.185657153 0.188028212 0.189786398 0.200696746 0.201796000 0.203309465 0.204635026 0.206773827 0.207126719 0.208880552 0.209525518 0.212242838 0.215091138 0.216484832 0.224681065 0.231448836 0.232379230 0.232970314 0.234903744 0.243982772 0.248008462 0.254238325 0.254985519 0.256667717 0.258689293 0.271367328 0.276178348 0.289387622 0.295202275 0.297097489 0.299214422 0.303838155 0.305847152 0.307519701 0.310896753 0.320019500 0.321771831 0.324655830 0.327647228 0.344583344 0.346393386 0.348004631 0.350507139 0.354666012 0.358774866 0.363835905 0.367835273 0.378307828 0.380569484 0.404599611 0.424824047 0.430032344 0.444300797 0.462760631 0.462988581 0.474213464 0.474815525 0.477886628 0.480177876 0.498019044 0.506563284 0.541200418 0.561498220 0.566714890 0.570663959 0.583220587 0.601873962 0.604190612 0.633265641 0.642936082 0.665264271 0.670327898 0.679856132 0.681286089 0.689533346 0.691559009 0.698422518 0.704241037 0.704753708 0.713652706 0.737071632 0.750679000 0.771570615 0.775826695 0.797855386 0.806756640 0.813712870 0.815296467 0.816738296 0.819675575 0.820369967 0.829309122 0.830517416 0.831857114 0.840436068 0.841054677 0.844770122 0.846895596 0.848651076 0.856481382 0.859285652 0.867334361 0.871754663 0.874903369 0.886490173 0.887700214 0.893591566 0.914761053 0.923900147 0.930858350 0.933639372 0.958345136 0.969122104 0.975823173 0.989117995 0.999612213 1.012915910 1.034009727 1.042602941 1.049151488 1.055208297 1.072742500 1.084181489 1.088640337 1.109989679 1.110584552 1.116093685 1.122411332 1.123318263 1.134002209 1.142188358 1.161142561 1.168704367 1.172569202 1.173187705 1.200372331 1.203659584 1.214558555 1.247103744 1.259374977 1.291778334 1.295704714 1.314075790 1.326108894 1.326433969 1.330136365 1.334408325 1.336013753 1.340924724 1.345757585 1.362013371 1.377316901 1.378850729 1.380938711 1.381566084 1.557339157 1.663461364 1.671880600</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">25</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.02603917" y3="-0.9411926" z3="-0.58331367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.74225347" y3="-1.92755031" z3="-1.39221811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.21670549" y3="-0.97546731" z3="-1.26946391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.86523815" y3="1.48705477" z3="-0.98434114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37686158" y3="0.31834963" z3="-0.42547847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72359205" y3="2.68906821" z3="-1.20831884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05567011" y3="2.73109741" z3="-0.83558383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35908433" y3="4.97413054" z3="-0.56350336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.84037935" y3="3.79676279" z3="-1.04831296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70811381" y3="5.84628448" z3="-0.44767979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20892785" y3="1.52999258" z3="-1.70775342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1942903" y3="0.35000075" z3="0.25552557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.8068589" y3="0.33162178" z3="-0.64338939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66899179" y3="0.68684387" z3="0.24043463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.79927655" y3="-0.92626827" z3="-1.4845567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08001921" y3="-2.46853065" z3="-1.3327435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83574097" y3="-5.33952953" z3="-6.39687528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.5985109" y3="-4.92929754" z3="-5.41109713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97321293" y3="-3.8512827" z3="-2.90680352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58216437" y3="-3.55237922" z3="-5.22580744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33274435" y3="-5.78289846" z3="-4.33804727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03426091" y3="-5.23788527" z3="-3.09474566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27905935" y3="-2.98316116" z3="-3.97971886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79818692" y3="-2.86470449" z3="-6.0471636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37113036" y3="-6.8679496" z3="-4.46337456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86123805" y3="-5.89147908" z3="-2.23542795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.59985046" y3="-3.33328165" z3="-1.64065923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41861518" y3="-3.80542287" z3="-0.91035369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.79566684" y3="-4.78416139" z3="-1.22050244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44042884" y3="-3.57284047" z3="0.55241562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.54130115" y3="-3.22821514" z3="3.33109227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.85904737" y3="-4.62022849" z3="1.38313754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07998074" y3="-2.34873121" z3="1.12648908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13086375" y3="-2.17982785" z3="2.50699194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.90175408" y3="-4.45145464" z3="2.76509964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.11717096" y3="-5.58928614" z3="0.94641313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.22209745" y3="-1.4947036" z3="0.51755895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16131022" y3="-1.21397097" z3="2.92857322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.19814335" y3="-5.28813515" z3="3.40343009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.5694855" y3="-3.0980133" z3="4.4168591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24001875" y3="-1.64743822" z3="-3.90374895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45560222" y3="-1.28847597" z3="-2.99678954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38627095" y3="3.60319992" z3="-1.28115114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15444415" y3="-2.83076622" z3="-1.68750304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95630779" y3="-3.07062909" z3="-0.56751196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08595813" y3="-2.27613404" z3="0.44305541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80733165" y3="-0.75345804" z3="0.87706477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.04946613" y3="-0.40303076" z3="-0.467687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49394853" y3="0.53557012" z3="1.11482755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.61446102" y3="-1.15846724" z3="2.51465401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.51662528" y3="-4.26485382" z3="-0.44499808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.27987374" y3="-4.55635022" z3="0.71564154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.56990983" y3="-0.29468733" z3="-1.456898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.57555749" y3="0.55025035" z3="-0.27208168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.80348775" y3="-1.20798292" z3="-0.53318432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.85049505" y3="0.7449563" z3="0.23913716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.80972063" y3="0.24100234" z3="1.93759013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99412511" y3="1.47880879" z3="1.40994495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.05987374" y3="-0.2490966" z3="2.96098265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.41899489" y3="-1.90758249" z3="2.40785838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.8645273" y3="-1.55400209" z3="3.22766521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.18990126" y3="-3.93408451" z3="0.74558577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.68697746" y3="-4.39333592" z3="1.62891907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.55968635" y3="-5.61438508" z3="0.62511925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36002363" y3="-2.18347366" z3="-0.11103834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15523013" y3="-3.23329451" z3="-1.01710108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45438984" y3="-4.3739895" z3="-0.64428841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97104656" y3="-4.46211151" z3="0.65605474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18617371" y3="-3.45419473" z3="1.59154063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8729434" y3="-2.31244866" z3="1.19817218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50275782" y3="-3.13079138" z3="-2.04830893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.25737626" y3="-5.17337017" z3="-1.35948748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.17606413" y3="-5.62873225" z3="1.04489469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78887754" y3="-3.56173019" z3="2.60163742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.01591255" y3="-1.4986409" z3="1.9112205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51880995" y3="3.97854356" z3="-0.27911793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8718606" y3="3.68707625" z3="-0.39060964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.31442007" y3="3.00394846" z3="-1.51818864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.45086621" y3="2.65822922" z3="-2.55441993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.10288292" y3="2.96711569" z3="-2.43235193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.14592386" y3="4.45553092" z3="0.63057108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57662523" y3="3.94637263" z3="0.39956558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.71828464" y3="2.59176579" z3="-1.59451079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.83541018" y3="2.13580994" z3="-3.43096204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.58579482" y3="2.67650365" z3="-3.2267302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.0468819" y3="-5.85987913" z3="2.22610825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.67583652" y3="-6.29437097" z3="0.15703261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.08243333" y3="1.99204242" z3="-2.58711204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43867223" y3="2.85575154" z3="-0.6504034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.76897467" y3="0.19042251" z3="-1.86118231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07232829" y3="1.42986518" z3="-1.75688384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.98001307" y3="0.12888346" z3="-2.60433568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46949779" y3="1.23755547" z3="-3.24916357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.50994362" y3="-0.8267794" z3="-2.66361213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39909167" y3="1.17774795" z3="-3.82197392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58851124" y3="2.55061211" z3="-2.46644715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75408414" y3="2.45738913" z3="-3.18862556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04339225" y3="3.49611046" z3="-2.44143661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12824595" y3="3.33271128" z3="-3.72710886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56985443" y3="3.93991391" z3="-0.26086736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71808334" y3="5.07986802" z3="-0.16773753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89033719" y3="4.04446016" z3="0.25974836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.3519374" y3="5.22524892" z3="0.79012559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54174663" y3="3.16846205" z3="0.24142608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37018145" y3="5.27946845" z3="1.18555758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.22957426" y3="6.29197754" z3="0.37293173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.51955369" y3="6.36938966" z3="0.8360096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.56841184" y3="7.16256109" z3="0.42443735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.90092993" y3="7.30532139" z3="1.253663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41506873" y3="-3.65649534" z3="-2.93086277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.65125488" y3="-4.70630269" z3="-2.69910044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26668053" y3="-3.23494832" z3="-3.49750953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53763108" y3="-3.63583806" z3="-3.59610039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6693106" y3="-1.42479277" z3="-1.93289539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46113497" y3="-0.79511004" z3="-2.38064149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.31058582" y3="-0.92779926" z3="-1.0191476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82905278" y3="-1.43928388" z3="-2.64575254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.026,-.9412,-.5833;6.7423,-1.9276,-1.3922;6.2167,-.9755,-1.2695;4.8652,1.4871,-.9843;4.3769,.3183,-.4255;2.7236,2.6891,-1.2083;4.0557,2.7311,-.8356;2.3591,4.9741,-.5635;1.8404,3.7968,-1.0483;1.7081,5.8463,-.4477;2.2089,1.53,-1.7078;3.1943,.35,.2555;1.8069,.3316,-.6434;.669,.6868,.2404;1.7993,-.9263,-1.4846;1.08,-2.4685,-1.3327;1.8357,-5.3395,-6.3969;1.5985,-4.9293,-5.4111;.9732,-3.8513,-2.9068;1.5822,-3.5524,-5.2258;1.3327,-5.7829,-4.338;1.0343,-5.2379,-3.0947;1.2791,-2.9832,-3.9797;1.7982,-2.8647,-6.0472;1.3711,-6.8679,-4.4634;.8612,-5.8915,-2.2354;.5999,-3.3333,-1.6407;-.4186,-3.8054,-.9104;-.7957,-4.7842,-1.2205;-.4404,-3.5728,.5524;-.5413,-3.2282,3.3311;-.859,-4.6202,1.3831;-.08,-2.3487,1.1265;-.1309,-2.1798,2.507;-.9018,-4.4515,2.7651;-1.1172,-5.5893,.9464;.2221,-1.4947,.5176;.1613,-1.214,2.9286;-1.1981,-5.2881,3.4034;-.5695,-3.098,4.4169;1.24,-1.6474,-3.9037;1.4556,-1.2885,-2.9968;.3863,3.6032,-1.2812;-2.1544,-2.8308,-1.6875;-2.9563,-3.0706,-.5675;-3.086,-2.2761,.4431;-3.8073,-.7535,.8771;-5.0495,-.403,-.4677;-2.4939,.5356,1.1148;-4.6145,-1.1585,2.5147;-3.5166,-4.2649,-.445;-4.2799,-4.5564,.7156;-4.5699,-.2947,-1.4569;-5.5756,.5503,-.2721;-5.8035,-1.208,-.5332;-1.8505,.745,.2391;-1.8097,.241,1.9376;-2.9941,1.4788,1.4099;-5.0599,-.2491,2.961;-5.419,-1.9076,2.4079;-3.8645,-1.554,3.2277;-5.1899,-3.9341,.7456;-3.687,-4.3933,1.6289;-4.5597,-5.6144,.6251;4.36,-2.1835,-.111;4.1552,-3.2333,-1.0171;3.4544,-4.374,-.6443;2.971,-4.4621,.6561;3.1862,-3.4542,1.5915;3.8729,-2.3124,1.1982;4.5028,-3.1308,-2.0483;3.2574,-5.1734,-1.3595;2.1761,-5.6287,1.0449;2.7889,-3.5617,2.6016;4.0159,-1.4986,1.9112;-.5188,3.9785,-.2791;-1.8719,3.6871,-.3906;-2.3144,3.0039,-1.5182;-1.4509,2.6582,-2.5544;-.1029,2.9671,-2.4324;-.1459,4.4555,.6306;-2.5766,3.9464,.3996;-3.7183,2.5918,-1.5945;-1.8354,2.1358,-3.431;.5858,2.6765,-3.2267;2.0469,-5.8599,2.2261;1.6758,-6.2944,.157;-4.0824,1.992,-2.5871;-4.4387,2.8558,-.6504;6.769,.1904,-1.8612;6.0723,1.4299,-1.7569;7.98,.1289,-2.6043;8.4695,1.2376,-3.2492;8.5099,-.8268,-2.6636;9.3991,1.1777,-3.822;6.5885,2.5506,-2.4664;7.7541,2.4574,-3.1886;6.0434,3.4961,-2.4414;8.1282,3.3327,-3.7271;4.5699,3.9399,-.2609;3.7181,5.0799,-.1677;5.8903,4.0445,.2597;6.3519,5.2252,.7901;6.5417,3.1685,.2414;7.3702,5.2795,1.1856;4.2296,6.292,.3729;5.5196,6.3694,.836;3.5684,7.1626,.4244;5.9009,7.3053,1.2537;-2.4151,-3.6565,-2.9309;-2.6513,-4.7063,-2.6991;-3.2667,-3.2349,-3.4975;-1.5376,-3.6358,-3.5961;-1.6693,-1.4248,-1.9329;-2.4611,-.7951,-2.3806;-1.3106,-.9278,-1.0191;-.8291,-1.4393,-2.6458;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.661986372726</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008390476442 0.000900828483 0.023645017323 0.005338141864</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037702298 -0.004292396 0.000068881 0.000173316 0.000239827 0.000247742 0.000317087 0.000383410 0.000417255 0.000501355 0.000634837 0.000758402 0.000776240 0.000830988 0.000886364 0.000964654 0.001019227 0.001175478 0.001228249 0.001279986 0.001402234 0.001414255 0.001483495 0.001491560 0.001729796 0.001754574 0.001916544 0.002146661 0.002661062 0.003002923 0.003210468 0.003353384 0.003779613 0.003993311 0.004286382 0.004716907 0.004741256 0.005225229 0.005562252 0.005936485 0.006564567 0.006701799 0.006850826 0.007277648 0.007761961 0.008137953 0.008526442 0.009179741 0.009612548 0.010016831 0.010217776 0.010492674 0.012525475 0.012697331 0.013146240 0.013328760 0.014245350 0.014602392 0.014988422 0.015290858 0.015792411 0.016168674 0.016412961 0.017069099 0.017442529 0.018278272 0.018897455 0.020291715 0.021048745 0.022197368 0.023000780 0.023207204 0.024521608 0.025357603 0.025953407 0.026482335 0.026727596 0.027760852 0.029634583 0.030410270 0.030972009 0.031926822 0.032323639 0.032784458 0.035167300 0.037530906 0.038253705 0.038878472 0.039287670 0.040283050 0.040809665 0.043511045 0.045260447 0.046124611 0.048881711 0.049670119 0.050665309 0.051313358 0.051359982 0.051557327 0.051800234 0.052281435 0.052386779 0.052542037 0.053797756 0.054712490 0.056492253 0.056837420 0.056965852 0.057214501 0.057592693 0.058434723 0.059210594 0.059732227 0.060330638 0.060499389 0.061437545 0.061687740 0.064549225 0.064613379 0.065528339 0.067698066 0.068032489 0.069249577 0.071593500 0.072647471 0.076365000 0.076936337 0.080020085 0.080977614 0.082081499 0.086303973 0.089451841 0.090800333 0.092590889 0.092838458 0.094171265 0.095123405 0.095292374 0.095880182 0.096374505 0.096861822 0.098119476 0.098571730 0.099432689 0.100020726 0.101086796 0.101332304 0.101975353 0.102673374 0.103802420 0.104352704 0.106017937 0.106610211 0.107328244 0.108245996 0.108694646 0.110124128 0.112552726 0.113345447 0.116033872 0.116460381 0.117149999 0.119424035 0.122764735 0.125614965 0.127583354 0.128205290 0.131286366 0.133032625 0.135112768 0.136687098 0.141960074 0.144395913 0.145688139 0.146083870 0.146724687 0.147976557 0.152479782 0.157235232 0.159742495 0.169714046 0.173852131 0.174637732 0.180359858 0.183155398 0.185159092 0.185875912 0.188029328 0.189972195 0.201185267 0.201902096 0.203317463 0.204655327 0.206774183 0.207126950 0.208881973 0.209526756 0.212245006 0.215091405 0.216500377 0.224682023 0.231449300 0.232380586 0.232970701 0.234904399 0.243984899 0.248008480 0.254239855 0.254986317 0.256667716 0.258691140 0.271367318 0.276184149 0.289387700 0.295206938 0.297117625 0.299226180 0.303850821 0.305847205 0.307519784 0.310981495 0.320019463 0.321772496 0.324665505 0.327655619 0.344659156 0.346427466 0.348012321 0.350507000 0.354667063 0.358774755 0.363836109 0.367868386 0.379370216 0.381557524 0.404643006 0.424949185 0.430032648 0.444304728 0.462795070 0.462992194 0.474381122 0.474918440 0.477886625 0.480264170 0.498019678 0.506663831 0.541254742 0.561677674 0.566717153 0.570819531 0.583231988 0.604165964 0.607155609 0.633750759 0.642957210 0.665264300 0.670366668 0.679854346 0.681286938 0.689628256 0.691561947 0.699622025 0.704241402 0.704761654 0.713691170 0.737075578 0.750679029 0.771570639 0.775827132 0.797855418 0.806756992 0.814242011 0.815435772 0.817274561 0.819863284 0.820450490 0.829323934 0.830597633 0.834395972 0.840449186 0.841178460 0.844771222 0.847781580 0.848715590 0.856500678 0.859307100 0.867334597 0.871767329 0.874910026 0.886490194 0.887700214 0.893593149 0.914761011 0.923900181 0.930860063 0.933639651 0.958345135 0.969126474 0.975823685 0.989117989 0.999612213 1.012918082 1.034010048 1.042603326 1.049151495 1.055208440 1.072744331 1.084181563 1.088640383 1.109989688 1.110584564 1.116093753 1.122411354 1.123318263 1.134002321 1.142188799 1.161142580 1.168704419 1.172569420 1.173187775 1.200372627 1.203662082 1.214560532 1.247139089 1.261819595 1.291794553 1.295706382 1.314083427 1.326115936 1.326438646 1.330136580 1.334409633 1.336586810 1.340926371 1.345757971 1.362013324 1.377344779 1.378852090 1.380938849 1.381567383 1.557342454 1.663746560 1.671883098</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">26</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.02317252" y3="-0.94151167" z3="-0.58560158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.73956002" y3="-1.92801894" z3="-1.39398085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.21411525" y3="-0.97586837" z3="-1.27131933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.86341893" y3="1.48692814" z3="-0.98576642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37428987" y3="0.31814856" z3="-0.42768585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72260389" y3="2.69064055" z3="-1.20855382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05473566" y3="2.7313918" z3="-0.83592616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35934578" y3="4.97475749" z3="-0.55972125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83985245" y3="3.79832465" z3="-1.04600213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70873605" y3="5.84695061" z3="-0.44203759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20739706" y3="1.53254251" z3="-1.70995992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1913259" y3="0.34999163" z3="0.25272304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.80454311" y3="0.33320191" z3="-0.64715116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66641911" y3="0.68866184" z3="0.2363695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.79666728" y3="-0.9241528" z3="-1.48896347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08035617" y3="-2.46827043" z3="-1.33484895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83193296" y3="-5.34495598" z3="-6.39658672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59584651" y3="-4.93370628" z3="-5.41095366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97306822" y3="-3.85308673" z3="-2.90716902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57940627" y3="-3.55659155" z3="-5.22715631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33158134" y3="-5.78620499" z3="-4.33662005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03433978" y3="-5.23990051" z3="-3.09359702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27759868" y3="-2.98607685" z3="-3.98134615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79425743" y3="-2.86973333" z3="-6.04951464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37010162" y3="-6.87139112" z3="-4.46078691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86247665" y3="-5.89261802" z3="-2.23336264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6005753" y3="-3.33369539" z3="-1.64137207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41676589" y3="-3.80580279" z3="-0.90918947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.79322219" y3="-4.78533256" z3="-1.21743793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43684612" y3="-3.57101786" z3="0.55317716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.53280116" y3="-3.22218139" z3="3.33136389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.8504681" y3="-4.61840518" z3="1.38632012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07960302" y3="-2.34460577" z3="1.12435997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12783441" y3="-2.17358379" z3="2.50464943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.89062267" y3="-4.44753273" z3="2.76813657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.10655189" y3="-5.5889439" z3="0.95166562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.21765484" y3="-1.49042993" z3="0.51308189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1621835" y3="-1.20603427" z3="2.9239087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.1828208" y3="-5.28421678" z3="3.40844935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.55882647" y3="-3.09040373" z3="4.41699839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23838811" y3="-1.65027594" z3="-3.90690608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45386349" y3="-1.28990065" z3="-3.00050864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38535879" y3="3.60578801" z3="-1.27727317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15443972" y3="-2.83463292" z3="-1.68623094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95356639" y3="-3.0728315" z3="-0.56340664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08035351" y3="-2.27829911" z3="0.44816486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80876909" y3="-0.75210816" z3="0.87201383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.03789593" y3="-0.3998512" z3="-0.48719615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49294373" y3="0.53408855" z3="1.12590001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.63550667" y3="-1.15288269" z3="2.50300972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.5128728" y3="-4.26685214" z3="-0.43901524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.27238165" y3="-4.55879164" z3="0.723941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.5590653" y3="-0.28651361" z3="-1.47115221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.56085453" y3="0.54825737" z3="-0.28519234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.79243307" y3="-1.2040726" z3="-0.55596298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.85213976" y3="0.73723736" z3="0.25622946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.81507059" y3="0.24578451" z3="1.9411904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99419412" y3="1.48032338" z3="1.4080813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.07568663" y3="-0.24586375" z3="2.9501298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.43697927" y3="-1.90301655" z3="2.39164974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.88817232" y3="-1.5485295" z3="3.2078196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.18414178" y3="-3.93887912" z3="0.7548776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.67739939" y3="-4.3925734" z3="1.63533461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.54952778" y3="-5.617831" z3="0.63590621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.35741789" y3="-2.18394359" z3="-0.11336786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15436293" y3="-3.23446817" z3="-1.0190354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45526843" y3="-4.37611738" z3="-0.64584667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97192479" y3="-4.4644725" z3="0.65447659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18494511" y3="-3.45565345" z3="1.58946174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.86988567" y3="-2.31292687" z3="1.19568566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50217853" y3="-3.13200894" z3="-2.05014934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.25981584" y3="-5.17623602" z3="-1.36066337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.17942407" y3="-5.63257163" z3="1.04386614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78756529" y3="-3.56333693" z3="2.59951977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.01130652" y3="-1.4985323" z3="1.90837438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51800136" y3="3.97994834" z3="-0.27322004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87155073" y3="3.69025465" z3="-0.38362361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.31644978" y3="3.01067078" z3="-1.51255661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.454397" y3="2.66536646" z3="-2.55013964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.10583765" y3="2.97205875" z3="-2.42894455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.14340231" y3="4.45485543" z3="0.63691231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57497433" y3="3.94888231" z3="0.40805091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.72112286" y3="2.60151879" z3="-1.58862002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.84073393" y3="2.14516952" z3="-3.42722396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.58169187" y3="2.68189926" z3="-3.22448838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.05260644" y3="-5.86477663" z3="2.22516128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.67873179" y3="-6.29833297" z3="0.15634234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.08558996" y3="2.0033415" z3="-2.57789073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4407084" y3="2.86391856" z3="-0.64519569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.7669207" y3="0.1900047" z3="-1.86254426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.07067725" y3="1.42963176" z3="-1.75797959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.97820734" y3="0.12837907" z3="-2.60529065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46827122" y3="1.23717815" z3="-3.24946718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.5078636" y3="-0.82742291" z3="-2.66476375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39806046" y3="1.1773223" z3="-3.82195437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58744591" y3="2.55053158" z3="-2.46687143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75323643" y3="2.4572311" z3="-3.18867832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04260376" y3="3.49618871" z3="-2.44160786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12788295" y3="3.33266014" z3="-3.72665373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56975786" y3="3.93911067" z3="-0.25961231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71859791" y3="5.07936394" z3="-0.16458958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89044171" y3="4.0422625" z3="0.26078172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35279208" y3="5.22209825" z3="0.79265102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.541416" y3="3.16597027" z3="0.24111587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37118559" y3="5.27524909" z3="1.18784684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2308403" y3="6.29047695" z3="0.37761017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.52100297" y3="6.36660334" z3="0.84038643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.57008561" y3="7.16128769" z3="0.43057289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.9029684" y3="7.30175812" z3="1.25925248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41536436" y3="-3.66407488" z3="-2.92730392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.64886088" y3="-4.71398219" z3="-2.69319745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26860162" y3="-3.24561943" z3="-3.49379756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53892099" y3="-3.64305473" z3="-3.59394904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6714062" y3="-1.42896325" z3="-1.93722004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46228015" y3="-0.80479947" z3="-2.3946028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.32025931" y3="-0.92480122" z3="-1.02417537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82667394" y3="-1.44547039" z3="-2.64487902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0232,-.9415,-.5856;6.7396,-1.928,-1.394;6.2141,-.9759,-1.2713;4.8634,1.4869,-.9858;4.3743,.3181,-.4277;2.7226,2.6906,-1.2086;4.0547,2.7314,-.8359;2.3593,4.9748,-.5597;1.8399,3.7983,-1.046;1.7087,5.847,-.442;2.2074,1.5325,-1.71;3.1913,.35,.2527;1.8045,.3332,-.6472;.6664,.6887,.2364;1.7967,-.9242,-1.489;1.0804,-2.4683,-1.3348;1.8319,-5.345,-6.3966;1.5958,-4.9337,-5.411;.9731,-3.8531,-2.9072;1.5794,-3.5566,-5.2272;1.3316,-5.7862,-4.3366;1.0343,-5.2399,-3.0936;1.2776,-2.9861,-3.9813;1.7943,-2.8697,-6.0495;1.3701,-6.8714,-4.4608;.8625,-5.8926,-2.2334;.6006,-3.3337,-1.6414;-.4168,-3.8058,-.9092;-.7932,-4.7853,-1.2174;-.4368,-3.571,.5532;-.5328,-3.2222,3.3314;-.8505,-4.6184,1.3863;-.0796,-2.3446,1.1244;-.1278,-2.1736,2.5046;-.8906,-4.4475,2.7681;-1.1066,-5.5889,.9517;.2177,-1.4904,.5131;.1622,-1.206,2.9239;-1.1828,-5.2842,3.4084;-.5588,-3.0904,4.417;1.2384,-1.6503,-3.9069;1.4539,-1.2899,-3.0005;.3854,3.6058,-1.2773;-2.1544,-2.8346,-1.6862;-2.9536,-3.0728,-.5634;-3.0804,-2.2783,.4482;-3.8088,-.7521,.872;-5.0379,-.3999,-.4872;-2.4929,.5341,1.1259;-4.6355,-1.1529,2.503;-3.5129,-4.2669,-.439;-4.2724,-4.5588,.7239;-4.5591,-.2865,-1.4712;-5.5609,.5483,-.2852;-5.7924,-1.2041,-.556;-1.8521,.7372,.2562;-1.8151,.2458,1.9412;-2.9942,1.4803,1.4081;-5.0757,-.2459,2.9501;-5.437,-1.903,2.3916;-3.8882,-1.5485,3.2078;-5.1841,-3.9389,.7549;-3.6774,-4.3926,1.6353;-4.5495,-5.6178,.6359;4.3574,-2.1839,-.1134;4.1544,-3.2345,-1.019;3.4553,-4.3761,-.6458;2.9719,-4.4645,.6545;3.1849,-3.4557,1.5895;3.8699,-2.3129,1.1957;4.5022,-3.132,-2.0501;3.2598,-5.1762,-1.3607;2.1794,-5.6326,1.0439;2.7876,-3.5633,2.5995;4.0113,-1.4985,1.9084;-.518,3.9799,-.2732;-1.8716,3.6903,-.3836;-2.3164,3.0107,-1.5126;-1.4544,2.6654,-2.5501;-.1058,2.9721,-2.4289;-.1434,4.4549,.6369;-2.575,3.9489,.4081;-3.7211,2.6015,-1.5886;-1.8407,2.1452,-3.4272;.5817,2.6819,-3.2245;2.0526,-5.8648,2.2252;1.6787,-6.2983,.1563;-4.0856,2.0033,-2.5779;-4.4407,2.8639,-.6452;6.7669,.19,-1.8625;6.0707,1.4296,-1.758;7.9782,.1284,-2.6053;8.4683,1.2372,-3.2495;8.5079,-.8274,-2.6648;9.3981,1.1773,-3.822;6.5874,2.5505,-2.4669;7.7532,2.4572,-3.1887;6.0426,3.4962,-2.4416;8.1279,3.3327,-3.7267;4.5698,3.9391,-.2596;3.7186,5.0794,-.1646;5.8904,4.0423,.2608;6.3528,5.2221,.7927;6.5414,3.166,.2411;7.3712,5.2752,1.1878;4.2308,6.2905,.3776;5.521,6.3666,.8404;3.5701,7.1613,.4306;5.903,7.3018,1.2593;-2.4154,-3.6641,-2.9273;-2.6489,-4.714,-2.6932;-3.2686,-3.2456,-3.4938;-1.5389,-3.6431,-3.5939;-1.6714,-1.429,-1.9372;-2.4623,-.8048,-2.3946;-1.3203,-.9248,-1.0242;-.8267,-1.4455,-2.6449;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662020456619</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007938119791 0.000819345313 0.023869873381 0.005336925071</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037702240 -0.004083418 0.000070337 0.000173976 0.000239690 0.000253665 0.000317357 0.000384137 0.000417039 0.000501260 0.000636608 0.000758434 0.000776407 0.000830965 0.000890653 0.000975664 0.001019965 0.001175451 0.001229356 0.001280300 0.001402519 0.001414253 0.001489009 0.001508382 0.001748006 0.001762019 0.001918440 0.002147296 0.002665024 0.003003418 0.003217830 0.003383345 0.003794922 0.003997614 0.004292057 0.004717790 0.004741148 0.005222949 0.005562296 0.005937920 0.006564742 0.006700670 0.006851148 0.007277648 0.007761199 0.008137263 0.008525145 0.009178983 0.009611591 0.010016801 0.010218561 0.010499743 0.012524495 0.012708386 0.013219548 0.013338546 0.014245441 0.014602444 0.014995087 0.015291175 0.015792668 0.016171689 0.016413882 0.017099876 0.017447814 0.018287954 0.018966834 0.020292047 0.021049319 0.022197986 0.023001255 0.023207258 0.024523182 0.025426686 0.025954427 0.026485849 0.026728781 0.027760878 0.029636697 0.030410595 0.030981654 0.031929645 0.032645329 0.033756157 0.036379979 0.037660111 0.038304484 0.038928516 0.039472510 0.040414753 0.040900319 0.043654757 0.045261444 0.046124604 0.049661016 0.049773984 0.050665331 0.051319378 0.051385226 0.051557469 0.051800410 0.052281436 0.052386784 0.052542120 0.053798410 0.054712827 0.056492249 0.056837438 0.056965996 0.057214677 0.057593047 0.058436431 0.059211001 0.059736040 0.060339953 0.060503498 0.061437572 0.061689109 0.064549260 0.064613600 0.065529596 0.067698042 0.068042422 0.069262942 0.071594158 0.072647462 0.076365204 0.076939221 0.080021067 0.080989595 0.082082114 0.086304762 0.089451930 0.090800279 0.092592079 0.092838628 0.094172723 0.095124050 0.095294809 0.095882257 0.096375448 0.096868810 0.098170056 0.098652650 0.099434092 0.100435851 0.101238459 0.101817702 0.102106318 0.102688498 0.103809613 0.104384043 0.106422625 0.107080758 0.107364369 0.108493105 0.108759326 0.110134493 0.112555243 0.113345485 0.116034492 0.116460352 0.117150786 0.119426911 0.122768164 0.125622831 0.127585981 0.128206111 0.131350850 0.133036589 0.135119285 0.136689522 0.141960469 0.144395776 0.145687678 0.146086145 0.146727011 0.147973836 0.152479961 0.157235448 0.159753291 0.169716238 0.173851867 0.174641223 0.180360128 0.183156032 0.185160997 0.185910236 0.188029116 0.190025482 0.201270899 0.201958466 0.203325631 0.204670315 0.206774182 0.207127211 0.208884052 0.209529099 0.212246756 0.215091761 0.216514919 0.224682823 0.231449741 0.232381594 0.232971813 0.234905098 0.243986836 0.248008559 0.254241302 0.254986487 0.256667722 0.258692401 0.271367308 0.276190033 0.289388542 0.295211933 0.297133811 0.299231624 0.303857668 0.305847677 0.307519961 0.311086263 0.320020230 0.321774264 0.324680611 0.327662373 0.344732138 0.346504168 0.348126038 0.350509045 0.354667699 0.358778766 0.363836264 0.367869969 0.379381132 0.381642019 0.404652336 0.425120266 0.430032710 0.444310780 0.462801828 0.462992420 0.474409465 0.474986438 0.477886617 0.480292091 0.498019961 0.506687538 0.541267256 0.561713695 0.566718122 0.570847373 0.583240864 0.604169463 0.613286547 0.634751312 0.642971172 0.665264746 0.670387345 0.679890859 0.681287053 0.689627029 0.691562041 0.699743129 0.704241408 0.704761767 0.713694283 0.737077510 0.750679031 0.771570754 0.775827226 0.797856270 0.806757232 0.814580630 0.815552193 0.817813365 0.819998228 0.820633451 0.829326432 0.830606928 0.838736160 0.840449997 0.841176619 0.844777805 0.848537033 0.849788710 0.856516360 0.859324552 0.867334715 0.871774990 0.874918995 0.886490249 0.887700629 0.893593518 0.914770038 0.923900181 0.930860093 0.933647811 0.958345227 0.969130225 0.975823990 0.989118009 0.999612213 1.012920351 1.034010131 1.042604009 1.049151576 1.055208668 1.072760057 1.084181586 1.088640488 1.109989698 1.110584569 1.116095071 1.122411361 1.123318259 1.134002320 1.142189196 1.161142734 1.168704503 1.172569514 1.173187889 1.200372862 1.203664548 1.214560648 1.247148462 1.262739120 1.291825692 1.295707201 1.314087050 1.326119751 1.326440915 1.330136652 1.334411017 1.336812116 1.340928625 1.345759199 1.362013193 1.377367367 1.378853461 1.380938938 1.381568226 1.557344074 1.664033139 1.671885405</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">27</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.02058909" y3="-0.94177995" z3="-0.58799336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.73706823" y3="-1.928379" z3="-1.39609953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.21170601" y3="-0.97618341" z3="-1.27344228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.86169401" y3="1.4868519" z3="-0.98725505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.37194102" y3="0.31796753" z3="-0.42989676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72158821" y3="2.69206398" z3="-1.20862635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05382428" y3="2.73168746" z3="-0.83627143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35960941" y3="4.97537202" z3="-0.55624852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.839335" y3="3.79978933" z3="-1.0437491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.70936296" y3="5.84760005" z3="-0.43685384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20583508" y3="1.53488555" z3="-1.71164539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1888281" y3="0.34987126" z3="0.25015766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.80210871" y3="0.33479103" z3="-0.64997161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6642814" y3="0.6906187" z3="0.23373055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.79353397" y3="-0.922081" z3="-1.49256644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08086236" y3="-2.46810898" z3="-1.33645162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82915655" y3="-5.35047534" z3="-6.39576065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59391456" y3="-4.93815423" z3="-5.41038522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97309067" y3="-3.85482806" z3="-2.90734033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57766535" y3="-3.56086185" z3="-5.22805617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33053707" y3="-5.78950058" z3="-4.33493506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03422235" y3="-5.24184107" z3="-3.09231844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27694064" y3="-2.98894798" z3="-3.98259136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79185586" y3="-2.87490903" z3="-6.05132315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36899878" y3="-6.87482173" z3="-4.45793088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86302911" y3="-5.8936745" z3="-2.2313134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6012565" y3="-3.33408147" z3="-1.64181443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41459402" y3="-3.80628853" z3="-0.90796984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.79097948" y3="-4.78631508" z3="-1.2147104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43381891" y3="-3.56901519" z3="0.55393485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.52440887" y3="-3.21644623" z3="3.33168303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.84259769" y3="-4.61640645" z3="1.38942217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07916519" y3="-2.34065691" z3="1.12241484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12460278" y3="-2.16781176" z3="2.50253112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.88006389" y3="-4.44359718" z3="2.77111139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.09662149" y3="-5.58840355" z3="0.95678988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.21381088" y3="-1.48655062" z3="0.50908031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16331769" y3="-1.19866808" z3="2.91956186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.16848426" y3="-5.28014224" z3="3.41324662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.54849569" y3="-3.08311778" z3="4.4171685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23815553" y3="-1.65310762" z3="-3.90967856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45270282" y3="-1.2912574" z3="-3.00366275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38448988" y3="3.60822135" z3="-1.27347324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15521584" y3="-2.83735919" z3="-1.68592871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95326889" y3="-3.07439965" z3="-0.56277835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08497339" y3="-2.27517293" z3="0.44407692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81064826" y3="-0.75057296" z3="0.86545487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.0317954" y3="-0.39758077" z3="-0.49693305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49636585" y3="0.5334041" z3="1.12549145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.64512433" y3="-1.15050796" z3="2.48877905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.50792547" y3="-4.270832" z3="-0.43318709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.26540629" y3="-4.56144714" z3="0.7312976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.53607009" y3="-0.2918046" z3="-1.48017948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.55729223" y3="0.55831193" z3="-0.30906221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.78766145" y3="-1.19992922" z3="-0.5739856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.83377948" y3="0.73842574" z3="0.26646155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.83430441" y3="0.2379729" z3="1.96211803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99072398" y3="1.47564042" z3="1.41081534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.09253943" y3="-0.23914949" z3="2.92829745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.45138665" y3="-1.89558895" z3="2.3718559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.90855999" y3="-1.54897239" z3="3.21449041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.17824003" y3="-3.94328386" z3="0.76272852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.6695983" y3="-4.39258827" z3="1.64154354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.54064197" y3="-5.62105327" z3="0.64540826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3550853" y3="-2.18433431" z3="-0.11570292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15361022" y3="-3.23557481" z3="-1.02091403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45613094" y3="-4.37806487" z3="-0.64728833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97276189" y3="-4.46653109" z3="0.65302166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18381691" y3="-3.45679922" z3="1.58744774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.86709558" y3="-2.31323385" z3="1.19321167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50172713" y3="-3.13324822" z3="-2.05194036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.2621827" y3="-5.1789404" z3="-1.36166902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.18257457" y3="-5.63594525" z3="1.04299164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78633983" y3="-3.5645163" z3="2.59747378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.00706525" y3="-1.49824456" z3="1.90549654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51721495" y3="3.98152795" z3="-0.26761037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87112514" y3="3.69320276" z3="-0.37661322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.31805453" y3="3.015956" z3="-1.50601435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.45773532" y3="2.67156639" z3="-2.54538294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.10866379" y3="2.97650808" z3="-2.42535839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.14098956" y3="4.45462785" z3="0.64277071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57333774" y3="3.95115703" z3="0.41635238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.72374635" y3="2.61018605" z3="-1.5821426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.84586534" y3="2.15346726" z3="-3.4229157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.57763605" y3="2.68672179" z3="-3.22210388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.05801215" y3="-5.86907638" z3="2.22432976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68135538" y3="-6.30183041" z3="0.1558363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.09273797" y3="2.02131638" z3="-2.57758367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44089376" y3="2.8683953" z3="-0.63518665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.76491168" y3="0.18970938" z3="-1.86423354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06901966" y3="1.42949256" z3="-1.75930998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.97634821" y3="0.12805046" z3="-2.60673409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46684227" y3="1.2369774" z3="-3.25035757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.50577852" y3="-0.82786135" z3="-2.66645236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39674877" y3="1.17710709" z3="-3.82264904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58622451" y3="2.55054625" z3="-2.46763513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75212524" y3="2.4572079" z3="-3.18924832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04161602" y3="3.49633588" z3="-2.44206957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12712243" y3="3.33274005" z3="-3.72680769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56967714" y3="3.93840299" z3="-0.25857824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71912185" y3="5.0789516" z3="-0.16180846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89055273" y3="4.04025851" z3="0.26159491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35363432" y3="5.21919987" z3="0.79480759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54108304" y3="3.16367335" z3="0.24075839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37214905" y3="5.27133564" z3="1.18982433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.23211796" y3="6.28915028" z3="0.38170582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.52245271" y3="6.36407031" z3="0.84418548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.57179141" y3="7.16020369" z3="0.43597104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.90500227" y3="7.29850646" z3="1.26411054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41561747" y3="-3.67073562" z3="-2.92443121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.64648951" y3="-4.72058002" z3="-2.68711003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27062651" y3="-3.25572515" z3="-3.49089322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.5400322" y3="-3.64935874" z3="-3.59210708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67365288" y3="-1.43227544" z3="-1.9415018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46210813" y3="-0.8131772" z3="-2.40979746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.33119033" y3="-0.92127179" z3="-1.02896019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.82292701" y3="-1.45138084" z3="-2.64208022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0206,-.9418,-.588;6.7371,-1.9284,-1.3961;6.2117,-.9762,-1.2734;4.8617,1.4869,-.9873;4.3719,.318,-.4299;2.7216,2.6921,-1.2086;4.0538,2.7317,-.8363;2.3596,4.9754,-.5562;1.8393,3.7998,-1.0437;1.7094,5.8476,-.4369;2.2058,1.5349,-1.7116;3.1888,.3499,.2502;1.8021,.3348,-.65;.6643,.6906,.2337;1.7935,-.9221,-1.4926;1.0809,-2.4681,-1.3365;1.8292,-5.3505,-6.3958;1.5939,-4.9382,-5.4104;.9731,-3.8548,-2.9073;1.5777,-3.5609,-5.2281;1.3305,-5.7895,-4.3349;1.0342,-5.2418,-3.0923;1.2769,-2.9889,-3.9826;1.7919,-2.8749,-6.0513;1.369,-6.8748,-4.4579;.863,-5.8937,-2.2313;.6013,-3.3341,-1.6418;-.4146,-3.8063,-.908;-.791,-4.7863,-1.2147;-.4338,-3.569,.5539;-.5244,-3.2164,3.3317;-.8426,-4.6164,1.3894;-.0792,-2.3407,1.1224;-.1246,-2.1678,2.5025;-.8801,-4.4436,2.7711;-1.0966,-5.5884,.9568;.2138,-1.4866,.5091;.1633,-1.1987,2.9196;-1.1685,-5.2801,3.4132;-.5485,-3.0831,4.4172;1.2382,-1.6531,-3.9097;1.4527,-1.2913,-3.0037;.3845,3.6082,-1.2735;-2.1552,-2.8374,-1.6859;-2.9533,-3.0744,-.5628;-3.085,-2.2752,.4441;-3.8106,-.7506,.8655;-5.0318,-.3976,-.4969;-2.4964,.5334,1.1255;-4.6451,-1.1505,2.4888;-3.5079,-4.2708,-.4332;-4.2654,-4.5614,.7313;-4.5361,-.2918,-1.4802;-5.5573,.5583,-.3091;-5.7877,-1.1999,-.574;-1.8338,.7384,.2665;-1.8343,.238,1.9621;-2.9907,1.4756,1.4108;-5.0925,-.2391,2.9283;-5.4514,-1.8956,2.3719;-3.9086,-1.549,3.2145;-5.1782,-3.9433,.7627;-3.6696,-4.3926,1.6415;-4.5406,-5.6211,.6454;4.3551,-2.1843,-.1157;4.1536,-3.2356,-1.0209;3.4561,-4.3781,-.6473;2.9728,-4.4665,.653;3.1838,-3.4568,1.5874;3.8671,-2.3132,1.1932;4.5017,-3.1332,-2.0519;3.2622,-5.1789,-1.3617;2.1826,-5.6359,1.043;2.7863,-3.5645,2.5975;4.0071,-1.4982,1.9055;-.5172,3.9815,-.2676;-1.8711,3.6932,-.3766;-2.3181,3.016,-1.506;-1.4577,2.6716,-2.5454;-.1087,2.9765,-2.4254;-.141,4.4546,.6428;-2.5733,3.9512,.4164;-3.7237,2.6102,-1.5821;-1.8459,2.1535,-3.4229;.5776,2.6867,-3.2221;2.058,-5.8691,2.2243;1.6814,-6.3018,.1558;-4.0927,2.0213,-2.5776;-4.4409,2.8684,-.6352;6.7649,.1897,-1.8642;6.069,1.4295,-1.7593;7.9763,.1281,-2.6067;8.4668,1.237,-3.2504;8.5058,-.8279,-2.6665;9.3967,1.1771,-3.8226;6.5862,2.5505,-2.4676;7.7521,2.4572,-3.1892;6.0416,3.4963,-2.4421;8.1271,3.3327,-3.7268;4.5697,3.9384,-.2586;3.7191,5.079,-.1618;5.8906,4.0403,.2616;6.3536,5.2192,.7948;6.5411,3.1637,.2408;7.3721,5.2713,1.1898;4.2321,6.2892,.3817;5.5225,6.3641,.8442;3.5718,7.1602,.436;5.905,7.2985,1.2641;-2.4156,-3.6707,-2.9244;-2.6465,-4.7206,-2.6871;-3.2706,-3.2557,-3.4909;-1.54,-3.6494,-3.5921;-1.6737,-1.4323,-1.9415;-2.4621,-.8132,-2.4098;-1.3312,-.9213,-1.029;-.8229,-1.4514,-2.6421;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662049786510</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008641543083 0.000806225765 0.023408368172 0.005338245572</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037703121 -0.003789708 0.000070259 0.000174476 0.000239682 0.000260086 0.000317511 0.000385437 0.000419698 0.000502124 0.000636484 0.000758437 0.000778824 0.000831035 0.000893295 0.000991087 0.001022478 0.001175782 0.001231907 0.001280763 0.001403996 0.001414271 0.001490761 0.001531316 0.001751100 0.001784298 0.001926201 0.002149227 0.002665004 0.003003633 0.003224698 0.003418784 0.003868274 0.004020859 0.004319778 0.004727666 0.004755619 0.005241696 0.005562628 0.005941845 0.006566180 0.006761752 0.006851279 0.007279744 0.007765740 0.008143259 0.008557422 0.009180717 0.009638775 0.010017695 0.010224691 0.010506132 0.012534455 0.012715400 0.013264177 0.013379459 0.014245862 0.014602896 0.014998134 0.015291179 0.015793286 0.016172141 0.016414202 0.017120208 0.017459807 0.018290642 0.019054266 0.020292454 0.021050284 0.022198316 0.023001230 0.023207239 0.024523345 0.025428991 0.025954463 0.026486289 0.026729008 0.027761049 0.029637424 0.030410709 0.030984793 0.031929844 0.032653685 0.033989527 0.036882044 0.037820000 0.038458025 0.038980225 0.039659318 0.040562041 0.041089392 0.043783012 0.045261899 0.046124600 0.049667615 0.050245751 0.050665345 0.051320979 0.051385289 0.051557774 0.051800511 0.052281441 0.052386783 0.052542087 0.053798689 0.054712996 0.056492244 0.056837436 0.056966016 0.057214663 0.057593056 0.058436340 0.059211132 0.059737394 0.060341486 0.060503966 0.061437552 0.061689348 0.064549272 0.064613570 0.065530517 0.067698093 0.068047784 0.069269798 0.071594323 0.072647450 0.076365159 0.076939968 0.080021019 0.080994265 0.082082154 0.086304711 0.089452079 0.090800240 0.092592043 0.092838807 0.094174185 0.095124138 0.095296454 0.095886196 0.096375598 0.096871144 0.098183093 0.098681329 0.099434182 0.100475970 0.101245994 0.101940482 0.102564440 0.102914612 0.103808170 0.104389900 0.106485023 0.107320155 0.107957679 0.108665846 0.110041685 0.110849027 0.112578568 0.113346037 0.116040052 0.116460561 0.117151279 0.119433270 0.122770594 0.125627100 0.127589449 0.128206245 0.131406675 0.133040849 0.135128670 0.136690858 0.141961050 0.144397089 0.145689267 0.146115496 0.146727805 0.148053367 0.152480251 0.157235737 0.159757668 0.169718094 0.173851800 0.174643350 0.180360375 0.183156152 0.185161201 0.185909911 0.188029110 0.190024726 0.201284932 0.201966822 0.203330974 0.204670957 0.206774211 0.207127279 0.208884563 0.209530629 0.212247233 0.215092107 0.216513526 0.224683103 0.231449992 0.232382154 0.232972504 0.234905409 0.243987932 0.248008703 0.254242045 0.254986534 0.256667735 0.258692686 0.271367303 0.276193228 0.289389442 0.295214358 0.297137156 0.299232515 0.303859210 0.305848068 0.307520021 0.311092964 0.320021313 0.321775826 0.324681215 0.327666399 0.344763042 0.346550980 0.348203836 0.350510810 0.354667860 0.358779558 0.363836281 0.367874418 0.379401031 0.381658801 0.404652452 0.425163923 0.430032952 0.444311324 0.462801782 0.462993271 0.474410769 0.475033154 0.477886625 0.480294396 0.498020004 0.506688201 0.541267722 0.561714267 0.566718303 0.570847259 0.583243509 0.604169465 0.615955999 0.635781629 0.642977374 0.665265623 0.670392371 0.679928007 0.681287252 0.689639756 0.691562269 0.701112640 0.704241824 0.704763905 0.713695974 0.737077851 0.750679032 0.771571160 0.775827228 0.797856225 0.806783357 0.814684876 0.815595260 0.818021234 0.820030931 0.820773356 0.829337556 0.830606854 0.840435867 0.841052449 0.842691215 0.844777543 0.848590835 0.854924240 0.856871085 0.859431073 0.867335102 0.871779741 0.874937271 0.886500700 0.887700632 0.893593808 0.914775017 0.923900204 0.930860506 0.933652401 0.958345300 0.969135142 0.975824081 0.989118064 0.999612212 1.012921673 1.034010163 1.042604330 1.049151559 1.055208911 1.072779245 1.084181609 1.088640604 1.109989701 1.110584568 1.116098317 1.122411360 1.123318256 1.134002598 1.142192594 1.161143924 1.168704627 1.172569542 1.173188039 1.200372978 1.203666245 1.214561086 1.247149515 1.262950805 1.291846346 1.295707437 1.314088053 1.326121213 1.326441783 1.330136616 1.334411397 1.336860895 1.340929292 1.345759208 1.362013796 1.377380463 1.378853854 1.380939020 1.381568761 1.557346526 1.664212191 1.671886118</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">28</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.01802521" y3="-0.94212669" z3="-0.59049083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.73455142" y3="-1.92880775" z3="-1.39843981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.20929916" y3="-0.97656065" z3="-1.27571461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.860059" y3="1.48671228" z3="-0.9886824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.36964966" y3="0.3177114" z3="-0.43211194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.72070606" y3="2.69349796" z3="-1.20848565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0530532" y3="2.73192641" z3="-0.83648052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36004878" y3="4.97597497" z3="-0.55266071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83895852" y3="3.80123613" z3="-1.04132057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71019047" y3="5.84825191" z3="-0.43155684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.2042585" y3="1.5372281" z3="-1.71307386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18634069" y3="0.34971157" z3="0.24770473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.79980223" y3="0.33643092" z3="-0.65266213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66214223" y3="0.69267081" z3="0.23124699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.79007827" y3="-0.91988788" z3="-1.49592001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08072626" y3="-2.4677672" z3="-1.33807374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82686002" y3="-5.35575903" z3="-6.39480945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59230914" y3="-4.94238818" z3="-5.40970892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97293875" y3="-3.85634175" z3="-2.90739664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57644057" y3="-3.56493122" z3="-5.22874768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32940428" y3="-5.79256401" z3="-4.33321463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03381482" y3="-5.24355688" z3="-3.09103667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27653184" y3="-2.99165329" z3="-3.98369819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79025352" y3="-2.87985921" z3="-6.05284657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36762823" y3="-6.87801694" z3="-4.45507904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86301022" y3="-5.89452031" z3="-2.22931207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60151664" y3="-3.33431495" z3="-1.64228555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41377483" y3="-3.80606542" z3="-0.90727013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.78909035" y3="-4.78718043" z3="-1.21178158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43138719" y3="-3.56666433" z3="0.55444259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.51594924" y3="-3.21038547" z3="3.33196072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.83493957" y3="-4.61406937" z3="1.39246389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07934259" y3="-2.33636224" z3="1.12027938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12154167" y3="-2.16167813" z3="2.50024876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.86944329" y3="-4.43936349" z3="2.77403636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.08699781" y3="-5.58752959" z3="0.96196964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.20935948" y3="-1.48226108" z3="0.50497465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16473123" y3="-1.19117882" z3="2.91508706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.15373843" y3="-5.27585903" z3="3.41811258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.53756491" y3="-3.07563476" z3="4.4173311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23830409" y3="-1.65571376" z3="-3.91236392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45181434" y3="-1.29249476" z3="-3.00669805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38376644" y3="3.61041374" z3="-1.26941291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15533573" y3="-2.84121285" z3="-1.68575744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95188381" y3="-3.07691251" z3="-0.56061504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08334593" y3="-2.27712449" z3="0.44585924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80984025" y3="-0.75022553" z3="0.86192732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.01983404" y3="-0.39436309" z3="-0.51302195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49306777" y3="0.5304221" z3="1.13679753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.66320689" y3="-1.14741396" z3="2.47981435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.50405324" y3="-4.27373194" z3="-0.42853552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.25877242" y3="-4.5642341" z3="0.73793968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.52728284" y3="-0.28469042" z3="-1.4908453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.54533599" y3="0.55662417" z3="-0.32165677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.77521361" y3="-1.19688621" z3="-0.59211431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.82554717" y3="0.72043683" z3="0.28245877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.84157842" y3="0.24611572" z3="1.97786047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00301146" y3="1.48657395" z3="1.39127508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.10827305" y3="-0.23460296" z3="2.91450318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.46918208" y3="-1.89141781" z3="2.35561835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.93196836" y3="-1.54603978" z3="3.2037541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.17287887" y3="-3.94806523" z3="0.76959607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.66176679" y3="-4.39213593" z3="1.64692114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.53161967" y3="-5.62477019" z3="0.65471716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.35279665" y3="-2.18480749" z3="-0.11816603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15279739" y3="-3.23671673" z3="-1.0229437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45682266" y3="-4.37997526" z3="-0.64887112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97345456" y3="-4.46849804" z3="0.65142969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18266558" y3="-3.45790785" z3="1.5853206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.86440189" y3="-2.31358067" z3="1.19062401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50115752" y3="-3.13452388" z3="-2.05390381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.26425371" y3="-5.18156628" z3="-1.36281771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.1853931" y3="-5.63909316" z3="1.04196964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78508323" y3="-3.56560844" z3="2.59531707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.00302673" y3="-1.4980156" z3="1.9025013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51624735" y3="3.98241027" z3="-0.26154875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87052337" y3="3.69529728" z3="-0.36922753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.31969474" y3="3.0212048" z3="-1.49970949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.46095753" y3="2.67774849" z3="-2.54066739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.11137663" y3="2.98087737" z3="-2.42164665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1384366" y3="4.45385154" z3="0.64902455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.57152771" y3="3.95314856" z3="0.42478507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.72657705" y3="2.61942169" z3="-1.57610685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.85083799" y3="2.1620805" z3="-3.41889308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.57369241" y3="2.69182884" z3="-3.21975228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.06321729" y3="-5.87320829" z3="2.22336969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68341098" y3="-6.30492849" z3="0.15519212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.09927588" y3="2.03991499" z3="-2.57505475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44039201" y3="2.87046105" z3="-0.62397164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.76293619" y3="0.18936074" z3="-1.86601853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06744791" y3="1.42931524" z3="-1.76061913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.97449739" y3="0.12765684" z3="-2.60832387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46545151" y3="1.23673278" z3="-3.25133925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.50365615" y3="-0.82838419" z3="-2.66837787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39544525" y3="1.17684147" z3="-3.82348816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58513535" y3="2.5505543" z3="-2.46830532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75111621" y3="2.45717099" z3="-3.18978108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04083575" y3="3.49651576" z3="-2.44234812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12649217" y3="3.3328279" z3="-3.72687544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56977378" y3="3.93763433" z3="-0.25743452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.71984348" y3="5.07849465" z3="-0.15894905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89084371" y3="4.03815712" z3="0.26250852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.3546976" y3="5.21620794" z3="0.79701708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54090198" y3="3.16125508" z3="0.24053266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37332886" y3="5.26730421" z3="1.19186552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.23364855" y3="6.28778745" z3="0.38581052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.52416372" y3="6.36147612" z3="0.84797316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.57378464" y3="7.15911028" z3="0.44133707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.90733747" y3="7.29520462" z3="1.26889755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41595169" y3="-3.67763592" z3="-2.92212466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.64419651" y3="-4.72739673" z3="-2.68230382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27268216" y3="-3.26568624" z3="-3.48811328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54140187" y3="-3.65577565" z3="-3.59119724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67534654" y3="-1.43658291" z3="-1.94590869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46090981" y3="-0.82288144" z3="-2.42574418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.3424068" y3="-0.919077" z3="-1.03375965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81791085" y3="-1.45795174" z3="-2.63824141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.018,-.9421,-.5905;6.7346,-1.9288,-1.3984;6.2093,-.9766,-1.2757;4.8601,1.4867,-.9887;4.3696,.3177,-.4321;2.7207,2.6935,-1.2085;4.0531,2.7319,-.8365;2.36,4.976,-.5527;1.839,3.8012,-1.0413;1.7102,5.8483,-.4316;2.2043,1.5372,-1.7131;3.1863,.3497,.2477;1.7998,.3364,-.6527;.6621,.6927,.2312;1.7901,-.9199,-1.4959;1.0807,-2.4678,-1.3381;1.8269,-5.3558,-6.3948;1.5923,-4.9424,-5.4097;.9729,-3.8563,-2.9074;1.5764,-3.5649,-5.2287;1.3294,-5.7926,-4.3332;1.0338,-5.2436,-3.091;1.2765,-2.9917,-3.9837;1.7903,-2.8799,-6.0528;1.3676,-6.878,-4.4551;.863,-5.8945,-2.2293;.6015,-3.3343,-1.6423;-.4138,-3.8061,-.9073;-.7891,-4.7872,-1.2118;-.4314,-3.5667,.5544;-.5159,-3.2104,3.332;-.8349,-4.6141,1.3925;-.0793,-2.3364,1.1203;-.1215,-2.1617,2.5002;-.8694,-4.4394,2.774;-1.087,-5.5875,.962;.2094,-1.4823,.505;.1647,-1.1912,2.9151;-1.1537,-5.2759,3.4181;-.5376,-3.0756,4.4173;1.2383,-1.6557,-3.9124;1.4518,-1.2925,-3.0067;.3838,3.6104,-1.2694;-2.1553,-2.8412,-1.6858;-2.9519,-3.0769,-.5606;-3.0833,-2.2771,.4459;-3.8098,-.7502,.8619;-5.0198,-.3944,-.513;-2.4931,.5304,1.1368;-4.6632,-1.1474,2.4798;-3.5041,-4.2737,-.4285;-4.2588,-4.5642,.7379;-4.5273,-.2847,-1.4908;-5.5453,.5566,-.3217;-5.7752,-1.1969,-.5921;-1.8255,.7204,.2825;-1.8416,.2461,1.9779;-3.003,1.4866,1.3913;-5.1083,-.2346,2.9145;-5.4692,-1.8914,2.3556;-3.932,-1.546,3.2038;-5.1729,-3.9481,.7696;-3.6618,-4.3921,1.6469;-4.5316,-5.6248,.6547;4.3528,-2.1848,-.1182;4.1528,-3.2367,-1.0229;3.4568,-4.38,-.6489;2.9735,-4.4685,.6514;3.1827,-3.4579,1.5853;3.8644,-2.3136,1.1906;4.5012,-3.1345,-2.0539;3.2643,-5.1816,-1.3628;2.1854,-5.6391,1.042;2.7851,-3.5656,2.5953;4.003,-1.498,1.9025;-.5162,3.9824,-.2615;-1.8705,3.6953,-.3692;-2.3197,3.0212,-1.4997;-1.461,2.6777,-2.5407;-.1114,2.9809,-2.4216;-.1384,4.4539,.649;-2.5715,3.9531,.4248;-3.7266,2.6194,-1.5761;-1.8508,2.1621,-3.4189;.5737,2.6918,-3.2198;2.0632,-5.8732,2.2234;1.6834,-6.3049,.1552;-4.0993,2.0399,-2.5751;-4.4404,2.8705,-.624;6.7629,.1894,-1.866;6.0674,1.4293,-1.7606;7.9745,.1277,-2.6083;8.4655,1.2367,-3.2513;8.5037,-.8284,-2.6684;9.3954,1.1768,-3.8235;6.5851,2.5506,-2.4683;7.7511,2.4572,-3.1898;6.0408,3.4965,-2.4423;8.1265,3.3328,-3.7269;4.5698,3.9376,-.2574;3.7198,5.0785,-.1589;5.8908,4.0382,.2625;6.3547,5.2162,.797;6.5409,3.1613,.2405;7.3733,5.2673,1.1919;4.2336,6.2878,.3858;5.5242,6.3615,.848;3.5738,7.1591,.4413;5.9073,7.2952,1.2689;-2.416,-3.6776,-2.9221;-2.6442,-4.7274,-2.6823;-3.2727,-3.2657,-3.4881;-1.5414,-3.6558,-3.5912;-1.6753,-1.4366,-1.9459;-2.4609,-.8229,-2.4257;-1.3424,-.9191,-1.0338;-.8179,-1.458,-2.6382;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662079269930</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011153649450 0.000795467588 0.021101469495 0.005338240391</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037703221 -0.003915638 0.000072303 0.000175471 0.000239873 0.000264508 0.000317597 0.000386384 0.000419561 0.000502530 0.000637241 0.000758573 0.000778565 0.000831161 0.000896314 0.001001393 0.001022373 0.001175717 0.001234014 0.001280750 0.001403946 0.001414594 0.001491134 0.001540850 0.001752475 0.001788734 0.001938566 0.002149292 0.002664953 0.003003525 0.003233800 0.003448415 0.003916218 0.004071763 0.004359243 0.004740192 0.004772879 0.005328035 0.005565298 0.005944246 0.006566248 0.006847202 0.006928941 0.007283093 0.007768752 0.008164631 0.008623677 0.009188988 0.009693144 0.010022382 0.010245874 0.010516542 0.012547877 0.012736339 0.013298478 0.013836338 0.014246424 0.014605349 0.015029095 0.015291233 0.015796800 0.016178104 0.016416104 0.017122509 0.017469285 0.018290505 0.019080254 0.020292487 0.021057358 0.022198475 0.023001399 0.023207221 0.024523453 0.025446163 0.025954644 0.026486275 0.026728971 0.027761337 0.029638416 0.030410904 0.030988657 0.031936454 0.032661116 0.034152499 0.036946169 0.037848347 0.038525442 0.038995027 0.039678634 0.040586633 0.041114861 0.043776132 0.045261878 0.046124622 0.049667932 0.050401660 0.050665468 0.051320841 0.051416830 0.051557946 0.051800635 0.052281446 0.052386783 0.052542327 0.053798687 0.054713071 0.056492262 0.056837436 0.056966109 0.057215793 0.057594193 0.058439137 0.059211247 0.059744641 0.060345819 0.060506459 0.061437516 0.061689607 0.064549285 0.064613841 0.065530852 0.067698889 0.068047446 0.069269098 0.071594334 0.072647440 0.076365513 0.076939907 0.080029864 0.080994084 0.082082200 0.086305046 0.089452174 0.090800228 0.092592331 0.092839130 0.094175906 0.095124638 0.095296322 0.095888940 0.096375590 0.096870964 0.098182768 0.098692605 0.099434162 0.100502395 0.101246254 0.101958552 0.102598265 0.103188963 0.103818497 0.104391943 0.106494956 0.107329023 0.108179430 0.108689271 0.110102825 0.112512864 0.113337293 0.115244604 0.116215565 0.116481363 0.117151168 0.119434854 0.122772004 0.125628280 0.127590294 0.128206263 0.131444465 0.133042257 0.135130674 0.136691893 0.141961512 0.144402324 0.145698931 0.146405185 0.146759439 0.148217075 0.152480243 0.157235715 0.159763801 0.169718720 0.173852191 0.174643628 0.180360328 0.183156235 0.185163069 0.185914296 0.188030619 0.190033724 0.201305432 0.201979101 0.203330751 0.204671540 0.206774501 0.207127276 0.208884553 0.209531145 0.212247216 0.215092148 0.216513403 0.224683100 0.231449998 0.232382126 0.232972952 0.234905520 0.243987889 0.248009278 0.254242125 0.254986519 0.256667748 0.258692718 0.271367310 0.276193974 0.289389797 0.295214496 0.297137195 0.299232755 0.303859169 0.305848423 0.307520016 0.311100161 0.320022000 0.321776605 0.324681806 0.327667073 0.344763666 0.346557153 0.348199880 0.350510691 0.354667865 0.358779760 0.363836270 0.367931842 0.379512925 0.381947361 0.404656762 0.425163513 0.430033328 0.444311446 0.462804015 0.462994524 0.474419347 0.475043565 0.477886629 0.480301023 0.498020026 0.506695158 0.541271521 0.561730276 0.566718309 0.570861078 0.583243542 0.604170259 0.616089749 0.635945474 0.642977506 0.665266290 0.670393834 0.679927251 0.681287415 0.689725961 0.691564330 0.703343558 0.704245611 0.704790386 0.713719287 0.737078006 0.750679045 0.771571821 0.775827271 0.797857553 0.806865216 0.814718367 0.815615244 0.818089218 0.820033271 0.820830114 0.829337389 0.830609985 0.840441700 0.841077492 0.844279701 0.844932029 0.848596200 0.856275152 0.859118622 0.864529733 0.867337136 0.871782257 0.874979774 0.886512014 0.887701331 0.893598023 0.914775069 0.923900298 0.930863205 0.933652709 0.958345299 0.969137787 0.975824074 0.989118179 0.999612212 1.012921947 1.034010158 1.042604571 1.049151676 1.055208932 1.072784282 1.084181618 1.088640644 1.109989703 1.110584567 1.116100347 1.122411362 1.123318252 1.134002758 1.142195111 1.161144966 1.168704665 1.172569548 1.173188086 1.200372988 1.203666560 1.214562996 1.247149542 1.263000805 1.291846576 1.295707466 1.314088088 1.326121195 1.326441802 1.330136583 1.334411397 1.336874126 1.340929391 1.345759235 1.362013741 1.377380913 1.378853891 1.380939016 1.381568761 1.557348079 1.664224915 1.671886304</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">29</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.01535143" y3="-0.94246205" z3="-0.59310801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.73183558" y3="-1.92929469" z3="-1.40099018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.20674076" y3="-0.97697396" z3="-1.27816878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8583879" y3="1.48658449" z3="-0.99022593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.36729138" y3="0.31749408" z3="-0.4344087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71980889" y3="2.69495747" z3="-1.20852424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05226687" y3="2.73219143" z3="-0.83680813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36052946" y3="4.97660078" z3="-0.54903588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83859268" y3="3.80272889" z3="-1.03891129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71106889" y3="5.84893112" z3="-0.42616594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20274765" y3="1.53964626" z3="-1.71476766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18386476" y3="0.34966573" z3="0.24516335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.79734266" y3="0.33823091" z3="-0.65539461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65997355" y3="0.69515462" z3="0.22861202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7867658" y3="-0.9176512" z3="-1.49928369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08007302" y3="-2.46709033" z3="-1.33987053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82540504" y3="-5.36123219" z3="-6.39341207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59126232" y3="-4.94675106" z3="-5.40868764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97255666" y3="-3.85783086" z3="-2.90745339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57584693" y3="-3.5691121" z3="-5.22917351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32837882" y3="-5.79569012" z3="-4.33121486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03313229" y3="-5.24526784" z3="-3.089604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27634039" y3="-2.9943836" z3="-3.9846943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78967201" y3="-2.88495354" z3="-6.05401546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36630614" y3="-6.88128855" z3="-4.45188735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86245759" y3="-5.89533463" z3="-2.22719281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60122846" y3="-3.33421072" z3="-1.64298516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41265065" y3="-3.80625798" z3="-0.90602526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.78714813" y3="-4.78829814" z3="-1.20850997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42845976" y3="-3.56450571" z3="0.55530023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.50715135" y3="-3.20387367" z3="3.33227301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.82699275" y3="-4.61167342" z3="1.39584862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.07915351" y3="-2.33206039" z3="1.11813083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11825915" y3="-2.15520641" z3="2.49785954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.85850154" y3="-4.43478924" z3="2.77725573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.07723385" y3="-5.58656517" z3="0.96754592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.20461706" y3="-1.47786997" z3="0.50051703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.166058" y3="-1.18300398" z3="2.91018877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.13863051" y3="-5.27112369" z3="3.42334921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.52626744" y3="-3.06750435" z3="4.4174913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23869277" y3="-1.65837676" z3="-3.91496862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45123188" y3="-1.2937012" z3="-3.00965872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38300755" y3="3.61299274" z3="-1.26539905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15583157" y3="-2.84505707" z3="-1.68454291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95049288" y3="-3.07948559" z3="-0.55771327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0813586" y3="-2.2789047" z3="0.44862943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8135866" y3="-0.74884547" z3="0.85390891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.0134668" y3="-0.39382739" z3="-0.52762459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49977965" y3="0.53155112" z3="1.13492844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.67720732" y3="-1.14215314" z3="2.46568282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.50105869" y3="-4.27651911" z3="-0.42362417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.25276092" y3="-4.56719591" z3="0.74474051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.50801223" y3="-0.28504495" z3="-1.50329585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.53844804" y3="0.55934923" z3="-0.33986595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.76867711" y3="-1.19566204" z3="-0.61321578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.81171963" y3="0.72597559" z3="0.29278131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.86210922" y3="0.24048015" z3="1.98983418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9936008" y3="1.47589523" z3="1.40114108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.12372728" y3="-0.23016862" z3="2.8992896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.48375699" y3="-1.88466744" z3="2.33674956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.95301372" y3="-1.54289862" z3="3.1967852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.1686042" y3="-3.95354353" z3="0.77705117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.65436616" y3="-4.39191118" z3="1.65215252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.52275446" y3="-5.62860095" z3="0.66374246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3503805" y3="-2.18524444" z3="-0.12070353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1517736" y3="-3.23785285" z3="-1.02499686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45725055" y3="-4.38183399" z3="-0.65041908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97393227" y3="-4.47035602" z3="0.64990123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18143231" y3="-3.4588974" z3="1.58321806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.86165471" y3="-2.31385043" z3="1.18799441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50036663" y3="-3.13586322" z3="-2.05590037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.26599806" y3="-5.18415662" z3="-1.36390407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.18801953" y3="-5.64211799" z3="1.04113276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78379214" y3="-3.56654583" z3="2.59320648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.99903324" y3="-1.49770347" z3="1.89943673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51514505" y3="3.98373392" z3="-0.25540532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86991193" y3="3.69862341" z3="-0.36187364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.32156762" y3="3.0280753" z3="-1.49347889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.46461302" y3="2.68534868" z3="-2.53617407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.11438037" y3="2.98615237" z3="-2.41814427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.13545738" y3="4.45261691" z3="0.65576893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.56945208" y3="3.95513924" z3="0.43397189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.72908373" y3="2.62888849" z3="-1.5686887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.85635787" y3="2.17204931" z3="-3.41494288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.5693323" y3="2.69764337" z3="-3.21759001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.06816152" y3="-5.87706384" z3="2.22257239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68535157" y3="-6.3080742" z3="0.15484339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.10445748" y3="2.05529377" z3="-2.56904722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44087987" y3="2.87619767" z3="-0.61480403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.76083019" y3="0.18896149" z3="-1.86799454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06580391" y3="1.42911418" z3="-1.76206645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.97247915" y3="0.12718991" z3="-2.61015665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46392371" y3="1.23642156" z3="-3.25252964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.50131418" y3="-0.82900525" z3="-2.67060955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39397985" y3="1.17649135" z3="-3.82457257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58399929" y3="2.55054667" z3="-2.469074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.75003848" y3="2.45710367" z3="-3.19043879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.04004718" y3="3.49669934" z3="-2.44264709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12582487" y3="3.33290152" z3="-3.72701787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56988965" y3="3.93685209" z3="-0.25637216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72062115" y3="5.07804653" z3="-0.15612193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89118083" y3="4.03600884" z3="0.2632914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.3558734" y3="5.21316773" z3="0.79904026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5407372" y3="3.15876693" z3="0.24015502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37465434" y3="5.2632056" z3="1.19364135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.23529273" y3="6.28642802" z3="0.38984594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.52602145" y3="6.35886237" z3="0.85160396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.57591329" y3="7.15803763" z3="0.44665675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.90987433" y3="7.29188536" z3="1.27347606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41646728" y3="-3.6846842" z3="-2.918899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.64186406" y3="-4.73455062" z3="-2.67701133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27495781" y3="-3.27577448" z3="-3.48440255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54297883" y3="-3.66205832" z3="-3.58937815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6772167" y3="-1.44103029" z3="-1.94961126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45943807" y3="-0.83402975" z3="-2.44363879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.35615653" y3="-0.91526847" z3="-1.03758974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.81178287" y3="-1.46543163" z3="-2.63211574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0154,-.9425,-.5931;6.7318,-1.9293,-1.401;6.2067,-.977,-1.2782;4.8584,1.4866,-.9902;4.3673,.3175,-.4344;2.7198,2.695,-1.2085;4.0523,2.7322,-.8368;2.3605,4.9766,-.549;1.8386,3.8027,-1.0389;1.7111,5.8489,-.4262;2.2027,1.5396,-1.7148;3.1839,.3497,.2452;1.7973,.3382,-.6554;.66,.6952,.2286;1.7868,-.9177,-1.4993;1.0801,-2.4671,-1.3399;1.8254,-5.3612,-6.3934;1.5913,-4.9468,-5.4087;.9726,-3.8578,-2.9075;1.5758,-3.5691,-5.2292;1.3284,-5.7957,-4.3312;1.0331,-5.2453,-3.0896;1.2763,-2.9944,-3.9847;1.7897,-2.885,-6.054;1.3663,-6.8813,-4.4519;.8625,-5.8953,-2.2272;.6012,-3.3342,-1.643;-.4127,-3.8063,-.906;-.7871,-4.7883,-1.2085;-.4285,-3.5645,.5553;-.5072,-3.2039,3.3323;-.827,-4.6117,1.3958;-.0792,-2.3321,1.1181;-.1183,-2.1552,2.4979;-.8585,-4.4348,2.7773;-1.0772,-5.5866,.9675;.2046,-1.4779,.5005;.1661,-1.183,2.9102;-1.1386,-5.2711,3.4233;-.5263,-3.0675,4.4175;1.2387,-1.6584,-3.915;1.4512,-1.2937,-3.0097;.383,3.613,-1.2654;-2.1558,-2.8451,-1.6845;-2.9505,-3.0795,-.5577;-3.0814,-2.2789,.4486;-3.8136,-.7488,.8539;-5.0135,-.3938,-.5276;-2.4998,.5316,1.1349;-4.6772,-1.1422,2.4657;-3.5011,-4.2765,-.4236;-4.2528,-4.5672,.7447;-4.508,-.285,-1.5033;-5.5384,.5593,-.3399;-5.7687,-1.1957,-.6132;-1.8117,.726,.2928;-1.8621,.2405,1.9898;-2.9936,1.4759,1.4011;-5.1237,-.2302,2.8993;-5.4838,-1.8847,2.3367;-3.953,-1.5429,3.1968;-5.1686,-3.9535,.7771;-3.6544,-4.3919,1.6522;-4.5228,-5.6286,.6637;4.3504,-2.1852,-.1207;4.1518,-3.2379,-1.025;3.4573,-4.3818,-.6504;2.9739,-4.4704,.6499;3.1814,-3.4589,1.5832;3.8617,-2.3139,1.188;4.5004,-3.1359,-2.0559;3.266,-5.1842,-1.3639;2.188,-5.6421,1.0411;2.7838,-3.5665,2.5932;3.999,-1.4977,1.8994;-.5151,3.9837,-.2554;-1.8699,3.6986,-.3619;-2.3216,3.0281,-1.4935;-1.4646,2.6853,-2.5362;-.1144,2.9862,-2.4181;-.1355,4.4526,.6558;-2.5695,3.9551,.434;-3.7291,2.6289,-1.5687;-1.8564,2.172,-3.4149;.5693,2.6976,-3.2176;2.0682,-5.8771,2.2226;1.6854,-6.3081,.1548;-4.1045,2.0553,-2.569;-4.4409,2.8762,-.6148;6.7608,.189,-1.868;6.0658,1.4291,-1.7621;7.9725,.1272,-2.6102;8.4639,1.2364,-3.2525;8.5013,-.829,-2.6706;9.394,1.1765,-3.8246;6.584,2.5505,-2.4691;7.75,2.4571,-3.1904;6.04,3.4967,-2.4426;8.1258,3.3329,-3.727;4.5699,3.9369,-.2564;3.7206,5.078,-.1561;5.8912,4.036,.2633;6.3559,5.2132,.799;6.5407,3.1588,.2402;7.3747,5.2632,1.1936;4.2353,6.2864,.3898;5.526,6.3589,.8516;3.5759,7.158,.4467;5.9099,7.2919,1.2735;-2.4165,-3.6847,-2.9189;-2.6419,-4.7346,-2.677;-3.275,-3.2758,-3.4844;-1.543,-3.6621,-3.5894;-1.6772,-1.441,-1.9496;-2.4594,-.834,-2.4436;-1.3562,-.9153,-1.0376;-.8118,-1.4654,-2.6321;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662105757663</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010924385782 0.000838556530 0.022250411173 0.005337816293</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037704425 -0.003981375 0.000072812 0.000175628 0.000240328 0.000269138 0.000317728 0.000387751 0.000419992 0.000502640 0.000637124 0.000758608 0.000778762 0.000831346 0.000896238 0.001003490 0.001024605 0.001176349 0.001235519 0.001280903 0.001405314 0.001414738 0.001492463 0.001540773 0.001753209 0.001790914 0.001942369 0.002151687 0.002670376 0.003004672 0.003237554 0.003452014 0.003930073 0.004096403 0.004380749 0.004743546 0.004786728 0.005386816 0.005571618 0.005944942 0.006566626 0.006847695 0.007077269 0.007289064 0.007769255 0.008191916 0.008680567 0.009198767 0.009726625 0.010026290 0.010265894 0.010524018 0.012551716 0.012746466 0.013301146 0.014245548 0.014398741 0.014618285 0.015144894 0.015291501 0.015808363 0.016195289 0.016420779 0.017123854 0.017475214 0.018298114 0.019078383 0.020292831 0.021064647 0.022200350 0.023002819 0.023207473 0.024525400 0.025517909 0.025956103 0.026487853 0.026729332 0.027761342 0.029640183 0.030411218 0.030994470 0.031955833 0.032670560 0.034343673 0.036942059 0.037846199 0.038516489 0.038993530 0.039681432 0.040586578 0.041146452 0.043831951 0.045261988 0.046124641 0.049667954 0.050411281 0.050665800 0.051321983 0.051530818 0.051558456 0.051800649 0.052281453 0.052386789 0.052542803 0.053798823 0.054713085 0.056492320 0.056837435 0.056966489 0.057218045 0.057596797 0.058446481 0.059212423 0.059774753 0.060368388 0.060523434 0.061437500 0.061691499 0.064549419 0.064614881 0.065530827 0.067700041 0.068059320 0.069283522 0.071595127 0.072647433 0.076367564 0.076941391 0.080053773 0.081010056 0.082082949 0.086306460 0.089452173 0.090800260 0.092594236 0.092839511 0.094177516 0.095127849 0.095298254 0.095889836 0.096376370 0.096875328 0.098193515 0.098701011 0.099434298 0.100693946 0.101257429 0.101970918 0.102600171 0.103285910 0.103847338 0.104398741 0.106496488 0.107335392 0.108303793 0.108710711 0.110110647 0.112530520 0.113339361 0.115959289 0.116450887 0.117150782 0.119425271 0.120522619 0.122779500 0.125629382 0.127590965 0.128206277 0.131505805 0.133042264 0.135130601 0.136691670 0.141962081 0.144407084 0.145703675 0.146638983 0.147126613 0.148391630 0.152480130 0.157235756 0.159764174 0.169718623 0.173851991 0.174643791 0.180360296 0.183156218 0.185165402 0.185918221 0.188030486 0.190063961 0.201321587 0.202001569 0.203331282 0.204680122 0.206774758 0.207127344 0.208885095 0.209531117 0.212247501 0.215092167 0.216525556 0.224683179 0.231450015 0.232382226 0.232972937 0.234905519 0.243988170 0.248009583 0.254242151 0.254986515 0.256667753 0.258693354 0.271367315 0.276194022 0.289389781 0.295215082 0.297142087 0.299233612 0.303860079 0.305848399 0.307520085 0.311201713 0.320022057 0.321776572 0.324698175 0.327667056 0.344768085 0.346563958 0.348266161 0.350513971 0.354667858 0.358782793 0.363836262 0.367982832 0.379572593 0.382125048 0.404659153 0.425269686 0.430033324 0.444317382 0.462805076 0.462994436 0.474422868 0.475053549 0.477886639 0.480309402 0.498020083 0.506699771 0.541274320 0.561741129 0.566718348 0.570869407 0.583244455 0.604170864 0.616367165 0.635946817 0.642979631 0.665266315 0.670398088 0.679939557 0.681287652 0.689741502 0.691566036 0.704137950 0.704282592 0.704869940 0.713737725 0.737078455 0.750679054 0.771572219 0.775827300 0.797858171 0.806904763 0.814718340 0.815616186 0.818092370 0.820033616 0.820840258 0.829338050 0.830613562 0.840469216 0.841477977 0.844556808 0.845956937 0.848596268 0.856306386 0.859187307 0.867333289 0.871772254 0.874335216 0.876380653 0.886564634 0.887701300 0.893612989 0.914790608 0.923900469 0.930876000 0.933670014 0.958345590 0.969141457 0.975824141 0.989119055 0.999612224 1.012921940 1.034010210 1.042604702 1.049151773 1.055208952 1.072784815 1.084181684 1.088640659 1.109989715 1.110584571 1.116100874 1.122411363 1.123318252 1.134002985 1.142196865 1.161146419 1.168704670 1.172569550 1.173188086 1.200372996 1.203666567 1.214573432 1.247149647 1.263068625 1.291871125 1.295707662 1.314088386 1.326121599 1.326442290 1.330136543 1.334412336 1.336897041 1.340930455 1.345759345 1.362014049 1.377383837 1.378854003 1.380939039 1.381568917 1.557351572 1.664239499 1.671886259</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">30</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.01288081" y3="-0.94282165" z3="-0.59564487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.72918759" y3="-1.9298356" z3="-1.40371831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.20429223" y3="-0.97743061" z3="-1.2807052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8568713" y3="1.48643896" z3="-0.99172042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.36522005" y3="0.31727747" z3="-0.43654485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71897282" y3="2.69630395" z3="-1.20840688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05157139" y3="2.73239974" z3="-0.83711321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36111141" y3="4.97718056" z3="-0.5456081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83833281" y3="3.80414511" z3="-1.03656627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71201879" y3="5.84953598" z3="-0.42101593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.20117346" y3="1.54182603" z3="-1.7159826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18175262" y3="0.34965555" z3="0.24298308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.79529147" y3="0.33981293" z3="-0.65760904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65828809" y3="0.69708572" z3="0.22678286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.78375073" y3="-0.91570279" z3="-1.50198262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07996277" y3="-2.4668229" z3="-1.34112352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82488671" y3="-5.36601965" z3="-6.39205631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59081589" y3="-4.95057945" z3="-5.40772556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97245235" y3="-3.85923814" z3="-2.90747152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57591227" y3="-3.57281" z3="-5.22942041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32753875" y3="-5.79847945" z3="-4.32951536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0324475" y3="-5.24684739" z3="-3.0884382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27660814" y3="-2.99680306" z3="-3.98543304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.7900849" y3="-2.88945698" z3="-6.05484406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36506968" y3="-6.88419634" z3="-4.44917594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86157731" y3="-5.89617625" z3="-2.22553213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60139602" y3="-3.33444628" z3="-1.64331351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.41059426" y3="-3.80712186" z3="-0.9046022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.78486966" y3="-4.78963647" z3="-1.20559042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42582706" y3="-3.56255217" z3="0.55610424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49897992" y3="-3.19760951" z3="3.33253336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.81966513" y3="-4.60945112" z3="1.39916186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0790976" y3="-2.32812095" z3="1.11606845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.115318" y3="-2.14909578" z3="2.49554549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.84837099" y3="-4.43035023" z3="2.7803538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.06798612" y3="-5.58579844" z3="0.97303574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.20062566" y3="-1.47433698" z3="0.49629247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16697348" y3="-1.17532172" z3="2.90549078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.12474385" y3="-5.26635197" z3="3.42841032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51593783" y3="-3.05951738" z3="4.41755058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23973922" y3="-1.66076315" z3="-3.91714276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45097638" y3="-1.29475004" z3="-3.01210981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38236077" y3="3.61535355" z3="-1.26122088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15725307" y3="-2.84836221" z3="-1.68464212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.95038557" y3="-3.08177603" z3="-0.55700615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08495334" y3="-2.2770418" z3="0.44525566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8122189" y3="-0.74937668" z3="0.85074677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-5.00253573" y3="-0.39255761" z3="-0.53990595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49534494" y3="0.52686961" z3="1.14556983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.68964741" y3="-1.14115532" z3="2.45489154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.49672023" y3="-4.28107774" z3="-0.41815181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.24710109" y3="-4.57042" z3="0.75119149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.49125033" y3="-0.28576005" z3="-1.51172738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.53223597" y3="0.56135608" z3="-0.35966315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.75752041" y3="-1.19448381" z3="-0.63204123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.80550369" y3="0.71048824" z3="0.30908355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.86982665" y3="0.24374516" z3="2.00789635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00621686" y3="1.48688107" z3="1.38196104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.14007188" y3="-0.2242425" z3="2.87962253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.49780149" y3="-1.88074675" z3="2.32025302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.9730362" y3="-1.54107781" z3="3.19672998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.16375178" y3="-3.95819719" z3="0.78358367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.64845191" y3="-4.39290716" z3="1.65779939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.5155322" y3="-5.63221613" z3="0.67203465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.34810883" y3="-2.18567712" z3="-0.12314525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15069119" y3="-3.23889807" z3="-1.02700691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45749527" y3="-4.38352735" z3="-0.65194616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97425474" y3="-4.47205436" z3="0.64840695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18024577" y3="-3.45982314" z3="1.58120279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8591275" y3="-2.31414648" z3="1.18548749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49944173" y3="-3.13708454" z3="-2.05787746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.26741038" y3="-5.18650713" z3="-1.36500501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.19025442" y3="-5.64484613" z3="1.04024582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78257569" y3="-3.5674106" z3="2.59119739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.99542345" y3="-1.49750045" z3="1.89655363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51378997" y3="3.98461079" z3="-0.24890703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86893348" y3="3.70079486" z3="-0.35364251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.32302313" y3="3.03341174" z3="-1.48601826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.46815058" y3="2.69236116" z3="-2.53102299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.11736948" y3="2.99126341" z3="-2.41439024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1322344" y3="4.45146841" z3="0.66244635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.56711247" y3="3.95709344" z3="0.443363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.73208797" y3="2.63906808" z3="-1.56191644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.86204361" y3="2.18217777" z3="-3.41071605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.56479902" y3="2.70388669" z3="-3.21561611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07265412" y3="-5.88066995" z3="2.2217415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68679527" y3="-6.31076601" z3="0.15434873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.11298225" y3="2.07754418" z3="-2.56859607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44038516" y3="2.87970576" z3="-0.60316752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.75878882" y3="0.18852505" z3="-1.87008992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06424611" y3="1.42888459" z3="-1.76357659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.97046684" y3="0.12668191" z3="-2.61220519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46237396" y3="1.23607628" z3="-3.25394082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.49896181" y3="-0.82967061" z3="-2.67311525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39245815" y3="1.17610815" z3="-3.82593304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58290474" y3="2.5505105" z3="-2.46992812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74896157" y3="2.45700949" z3="-3.19124626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03931238" y3="3.49685734" z3="-2.44297127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12514485" y3="3.33295806" z3="-3.72729801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57009838" y3="3.93608605" z3="-0.25544437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72148521" y3="5.07760148" z3="-0.15349868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89161771" y3="4.03395354" z3="0.26388675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35714286" y3="5.21027958" z3="0.80074245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54068085" y3="3.15638567" z3="0.23967579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37608537" y3="5.25932357" z3="1.1950444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.23699533" y3="6.28512108" z3="0.39357126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.52795225" y3="6.35637798" z3="0.85485387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.57807006" y3="7.15699011" z3="0.45163435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.91247632" y3="7.28873921" z3="1.27757254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41713573" y3="-3.6916257" z3="-2.91659451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.63941848" y3="-4.74161031" z3="-2.67192967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27758084" y3="-3.28622319" z3="-3.48178307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54457641" y3="-3.66797293" z3="-3.5881629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67949405" y3="-1.44525035" z3="-1.95387413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45757207" y3="-0.84412037" z3="-2.46052829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.36946185" y3="-0.91246335" z3="-1.04255488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80687901" y3="-1.47185388" z3="-2.62682618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0129,-.9428,-.5956;6.7292,-1.9298,-1.4037;6.2043,-.9774,-1.2807;4.8569,1.4864,-.9917;4.3652,.3173,-.4365;2.719,2.6963,-1.2084;4.0516,2.7324,-.8371;2.3611,4.9772,-.5456;1.8383,3.8041,-1.0366;1.712,5.8495,-.421;2.2012,1.5418,-1.716;3.1818,.3497,.243;1.7953,.3398,-.6576;.6583,.6971,.2268;1.7838,-.9157,-1.502;1.08,-2.4668,-1.3411;1.8249,-5.366,-6.3921;1.5908,-4.9506,-5.4077;.9725,-3.8592,-2.9075;1.5759,-3.5728,-5.2294;1.3275,-5.7985,-4.3295;1.0324,-5.2468,-3.0884;1.2766,-2.9968,-3.9854;1.7901,-2.8895,-6.0548;1.3651,-6.8842,-4.4492;.8616,-5.8962,-2.2255;.6014,-3.3344,-1.6433;-.4106,-3.8071,-.9046;-.7849,-4.7896,-1.2056;-.4258,-3.5626,.5561;-.499,-3.1976,3.3325;-.8197,-4.6095,1.3992;-.0791,-2.3281,1.1161;-.1153,-2.1491,2.4955;-.8484,-4.4304,2.7804;-1.068,-5.5858,.973;.2006,-1.4743,.4963;.167,-1.1753,2.9055;-1.1247,-5.2664,3.4284;-.5159,-3.0595,4.4176;1.2397,-1.6608,-3.9171;1.451,-1.2948,-3.0121;.3824,3.6154,-1.2612;-2.1573,-2.8484,-1.6846;-2.9504,-3.0818,-.557;-3.085,-2.277,.4453;-3.8122,-.7494,.8507;-5.0025,-.3926,-.5399;-2.4953,.5269,1.1456;-4.6896,-1.1412,2.4549;-3.4967,-4.2811,-.4182;-4.2471,-4.5704,.7512;-4.4913,-.2858,-1.5117;-5.5322,.5614,-.3597;-5.7575,-1.1945,-.632;-1.8055,.7105,.3091;-1.8698,.2437,2.0079;-3.0062,1.4869,1.382;-5.1401,-.2242,2.8796;-5.4978,-1.8807,2.3203;-3.973,-1.5411,3.1967;-5.1638,-3.9582,.7836;-3.6485,-4.3929,1.6578;-4.5155,-5.6322,.672;4.3481,-2.1857,-.1231;4.1507,-3.2389,-1.027;3.4575,-4.3835,-.6519;2.9743,-4.4721,.6484;3.1802,-3.4598,1.5812;3.8591,-2.3141,1.1855;4.4994,-3.1371,-2.0579;3.2674,-5.1865,-1.365;2.1903,-5.6448,1.0402;2.7826,-3.5674,2.5912;3.9954,-1.4975,1.8966;-.5138,3.9846,-.2489;-1.8689,3.7008,-.3536;-2.323,3.0334,-1.486;-1.4682,2.6924,-2.531;-.1174,2.9913,-2.4144;-.1322,4.4515,.6624;-2.5671,3.9571,.4434;-3.7321,2.6391,-1.5619;-1.862,2.1822,-3.4107;.5648,2.7039,-3.2156;2.0727,-5.8807,2.2217;1.6868,-6.3108,.1543;-4.113,2.0775,-2.5686;-4.4404,2.8797,-.6032;6.7588,.1885,-1.8701;6.0642,1.4289,-1.7636;7.9705,.1267,-2.6122;8.4624,1.2361,-3.2539;8.499,-.8297,-2.6731;9.3925,1.1761,-3.8259;6.5829,2.5505,-2.4699;7.749,2.457,-3.1912;6.0393,3.4969,-2.443;8.1251,3.333,-3.7273;4.5701,3.9361,-.2554;3.7215,5.0776,-.1535;5.8916,4.034,.2639;6.3571,5.2103,.8007;6.5407,3.1564,.2397;7.3761,5.2593,1.195;4.237,6.2851,.3936;5.528,6.3564,.8549;3.5781,7.157,.4516;5.9125,7.2887,1.2776;-2.4171,-3.6916,-2.9166;-2.6394,-4.7416,-2.6719;-3.2776,-3.2862,-3.4818;-1.5446,-3.668,-3.5882;-1.6795,-1.4453,-1.9539;-2.4576,-.8441,-2.4605;-1.3695,-.9125,-1.0426;-.8069,-1.4719,-2.6268;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662147094088</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009700362679 0.000794465432 0.021601641356 0.005337902572</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037716799 -0.003341826 0.000072990 0.000176423 0.000241947 0.000269308 0.000318076 0.000387739 0.000419991 0.000502871 0.000637393 0.000759147 0.000779566 0.000832379 0.000897908 0.001003569 0.001029216 0.001176279 0.001236577 0.001281026 0.001407064 0.001414745 0.001493611 0.001547615 0.001753398 0.001795100 0.001943052 0.002152935 0.002678482 0.003004970 0.003237620 0.003453850 0.003936751 0.004111922 0.004388402 0.004745373 0.004798878 0.005393834 0.005574472 0.005944947 0.006568927 0.006847866 0.007177975 0.007295839 0.007769631 0.008198843 0.008698419 0.009199099 0.009735608 0.010026056 0.010272862 0.010523452 0.012551434 0.012748609 0.013301094 0.014246326 0.014508887 0.014637231 0.015222559 0.015291935 0.015815998 0.016206564 0.016422182 0.017150522 0.017474504 0.018313665 0.019109336 0.020294291 0.021065064 0.022201101 0.023005178 0.023208490 0.024527719 0.025571454 0.025958058 0.026490920 0.026729980 0.027761390 0.029642239 0.030411545 0.031000323 0.031969125 0.032675714 0.034451689 0.036956307 0.037862101 0.038550303 0.039005586 0.039708328 0.040617815 0.041341613 0.044067468 0.045262430 0.046124659 0.049667967 0.050412391 0.050666149 0.051322570 0.051557889 0.051657169 0.051800679 0.052281460 0.052386792 0.052542991 0.053799271 0.054713069 0.056492385 0.056837438 0.056966676 0.057220179 0.057598388 0.058451503 0.059213542 0.059794169 0.060390062 0.060548399 0.061437597 0.061692068 0.064549382 0.064614858 0.065530808 0.067702629 0.068074778 0.069301795 0.071596885 0.072647434 0.076371878 0.076945303 0.080073532 0.081037634 0.082084677 0.086308353 0.089452206 0.090800309 0.092596582 0.092839667 0.094179967 0.095132177 0.095302238 0.095890332 0.096380640 0.096887768 0.098246968 0.098728971 0.099434476 0.101010463 0.101327693 0.101991975 0.102600412 0.103322642 0.103887668 0.104399755 0.106496383 0.107347847 0.108386467 0.108739259 0.110115428 0.112533730 0.113339375 0.115974224 0.116452075 0.117150741 0.119427154 0.122757986 0.124253726 0.125630064 0.127590926 0.128206753 0.131578234 0.133046493 0.135136483 0.136691456 0.141962277 0.144410039 0.145708677 0.146670721 0.147826163 0.148506691 0.152480264 0.157235799 0.159766237 0.169719535 0.173851764 0.174645999 0.180360696 0.183156169 0.185166385 0.185925308 0.188030474 0.190097762 0.201389910 0.202076106 0.203338228 0.204694556 0.206775388 0.207127484 0.208886655 0.209532150 0.212248713 0.215092377 0.216531240 0.224683582 0.231450286 0.232382478 0.232973794 0.234905680 0.243989949 0.248010910 0.254242589 0.254986698 0.256667756 0.258695264 0.271367329 0.276195532 0.289390538 0.295218528 0.297156066 0.299235630 0.303862669 0.305848498 0.307520434 0.311298523 0.320023303 0.321777536 0.324710805 0.327668925 0.344797333 0.346611277 0.348487182 0.350522836 0.354667892 0.358787096 0.363836251 0.367991371 0.379591787 0.382216192 0.404662223 0.425408293 0.430033325 0.444320655 0.462805843 0.462995306 0.474426313 0.475122902 0.477886669 0.480327291 0.498020140 0.506706019 0.541278528 0.561755240 0.566718472 0.570879486 0.583247345 0.604171669 0.617516345 0.636094448 0.642986731 0.665266927 0.670407046 0.679952747 0.681288515 0.689767062 0.691567259 0.704199963 0.704341690 0.704924442 0.713749772 0.737079467 0.750679061 0.771572428 0.775827334 0.797858974 0.806908221 0.814734794 0.815616827 0.818093139 0.820037143 0.820840524 0.829338766 0.830616853 0.840484499 0.842148790 0.844560936 0.847237504 0.848596715 0.856306591 0.859190017 0.867333909 0.871779386 0.874841082 0.885182639 0.886972293 0.887703743 0.893665138 0.914840223 0.923900714 0.930895579 0.933714553 0.958346368 0.969142681 0.975824331 0.989119404 0.999612231 1.012921931 1.034010208 1.042604873 1.049151843 1.055208975 1.072787112 1.084181737 1.088640660 1.109989742 1.110584578 1.116100926 1.122411365 1.123318250 1.134003011 1.142196970 1.161147123 1.168704684 1.172569597 1.173188153 1.200373094 1.203667449 1.214580044 1.247150639 1.263329187 1.291957675 1.295708339 1.314089728 1.326123412 1.326443695 1.330136520 1.334414195 1.336963659 1.340932974 1.345759456 1.362016388 1.377400412 1.378854768 1.380939120 1.381569597 1.557354417 1.664422749 1.671886917</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">31</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.01007137" y3="-0.94318584" z3="-0.59811794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.72611095" y3="-1.93051891" z3="-1.40641883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.20149013" y3="-0.97798487" z3="-1.28321914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.85518172" y3="1.48625128" z3="-0.99325107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.36286372" y3="0.31709836" z3="-0.43860356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71799922" y3="2.69770707" z3="-1.20820953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.05079311" y3="2.73261869" z3="-0.8374569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36176545" y3="4.97786116" z3="-0.54205882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83800105" y3="3.80567072" z3="-1.03401544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71313887" y3="5.8503131" z3="-0.41575029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.19937892" y3="1.54414403" z3="-1.71712514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1793767" y3="0.34987565" z3="0.24096831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.79291312" y3="0.34144586" z3="-0.65972924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65582438" y3="0.69909667" z3="0.22454039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7808002" y3="-0.9137104" z3="-1.50450384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08001582" y3="-2.46712308" z3="-1.34217964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82468089" y3="-5.37080538" z3="-6.39068905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59069232" y3="-4.95453749" z3="-5.40667656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97259733" y3="-3.86098922" z3="-2.90715024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57627912" y3="-3.57664616" z3="-5.22939749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32698619" y3="-5.80148854" z3="-4.32779759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03210149" y3="-5.24876316" z3="-3.08716296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27705676" y3="-2.99952851" z3="-3.98587441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79074875" y3="-2.89398972" z3="-6.05534852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36406137" y3="-6.88731636" z3="-4.44658193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86102644" y3="-5.89739152" z3="-2.22376493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60190212" y3="-3.33525299" z3="-1.64333406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.4105359" y3="-3.80665374" z3="-0.90408072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.78298246" y3="-4.7908126" z3="-1.2022732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42370557" y3="-3.56013328" z3="0.55665274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49095469" y3="-3.19031651" z3="3.33268256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.81187263" y3="-4.60686221" z3="1.40265575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08003668" y3="-2.32340825" z3="1.11345733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11308789" y3="-2.14193874" z3="2.4926889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.83770952" y3="-4.42526201" z3="2.78367234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.05786228" y3="-5.58498836" z3="0.97911471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.19480652" y3="-1.46966732" z3="0.49127226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16722148" y3="-1.16645816" z3="2.89992016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.10960175" y3="-5.26107334" z3="3.43402387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50541223" y3="-3.05039522" z3="4.41753206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24073335" y3="-1.66340582" z3="-3.91896285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45068111" y3="-1.29615837" z3="-3.0141696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38158533" y3="3.6181219" z3="-1.25696263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15642534" y3="-2.85348317" z3="-1.68391985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94869464" y3="-3.08523233" z3="-0.55440125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08227667" y3="-2.28072553" z3="0.44821443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81436028" y3="-0.74804131" z3="0.84310857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.99362039" y3="-0.39135944" z3="-0.55629405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50142362" y3="0.52838899" z3="1.14679946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.70560414" y3="-1.13688032" z3="2.44231862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.49350073" y3="-4.28407381" z3="-0.4138598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.24099614" y3="-4.57342813" z3="0.75776612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.4798194" y3="-0.27908288" z3="-1.52342937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.52300668" y3="0.55842366" z3="-0.37196118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.74572962" y3="-1.19470836" z3="-0.65235151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.78558417" y3="0.70715408" z3="0.32159066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.89035259" y3="0.24491118" z3="2.02274877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00276636" y3="1.48052991" z3="1.38347104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.15306607" y3="-0.22178063" z3="2.86679858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.51388695" y3="-1.87565183" z3="2.30186987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-3.99463785" y3="-1.53951434" z3="3.18362652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.15911057" y3="-3.96331165" z3="0.79011448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.64089092" y3="-4.39217107" z3="1.66302771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.50684193" y3="-5.63635864" z3="0.68163341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3455514" y3="-2.18611711" z3="-0.12549421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14945456" y3="-3.24002012" z3="-1.02888021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45768515" y3="-4.38534558" z3="-0.65329938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97452488" y3="-4.4738623" z3="0.64707779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17886655" y3="-3.46077743" z3="1.57930635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.85631193" y3="-2.3144178" z3="1.18306814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49830473" y3="-3.13837294" z3="-2.05973709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.26875087" y3="-5.18897784" z3="-1.3659334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.19244979" y3="-5.64768237" z3="1.03953729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78113474" y3="-3.56828507" z3="2.58929494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.99145504" y3="-1.49721324" z3="1.89371206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51257573" y3="3.9858858" z3="-0.24235476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86834857" y3="3.70466012" z3="-0.34607335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.32532926" y3="3.04168574" z3="-1.480057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.47218495" y3="2.70118541" z3="-2.52652837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.12065315" y3="2.99729863" z3="-2.41079992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.12891453" y3="4.44971417" z3="0.66974539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.56483086" y3="3.9595809" z3="0.45296544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.7350243" y3="2.64997783" z3="-1.55477396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.8680894" y3="2.19364088" z3="-3.40675064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.55990839" y3="2.71087562" z3="-3.21369228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07711003" y3="-5.88436033" z3="2.22109423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68819423" y3="-6.31359009" z3="0.15408909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.11787182" y3="2.09459847" z3="-2.5619274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44081606" y3="2.88442618" z3="-0.59254823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.75649682" y3="0.18791417" z3="-1.87221286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.06251839" y3="1.42852522" z3="-1.76514294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.9682234" y3="0.12588641" z3="-2.61425645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.46071697" y3="1.23539637" z3="-3.25534676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.49630879" y3="-0.83066546" z3="-2.67560596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.39085076" y3="1.1753146" z3="-3.82725281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58176676" y3="2.55028981" z3="-2.47085392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74786917" y3="2.45663594" z3="-3.19207866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03862804" y3="3.49688602" z3="-2.44340793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12455095" y3="3.33270294" z3="-3.72759148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57035635" y3="3.93528501" z3="-0.25458894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72247606" y3="5.07717497" z3="-0.1508745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89215033" y3="4.03175696" z3="0.26434376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.35861551" y3="5.2071982" z3="0.80233368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54066569" y3="3.15381905" z3="0.23900302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37774053" y3="5.25515939" z3="1.19630586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.23895136" y3="6.28378346" z3="0.39730736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.5301617" y3="6.35375677" z3="0.85807399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.58054479" y3="7.15595744" z3="0.45669526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.91543645" y3="7.28540956" z3="1.28168254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41716091" y3="-3.69975557" z3="-2.91384713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.63628088" y3="-4.74978394" z3="-2.66679944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27979055" y3="-3.2977236" z3="-3.47807615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.5460469" y3="-3.67528426" z3="-3.58739365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68226171" y3="-1.44992623" z3="-1.95876431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45838907" y3="-0.8559485" z3="-2.47618949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.38131765" y3="-0.90954421" z3="-1.0490978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80471017" y3="-1.47710434" z3="-2.6246306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0101,-.9432,-.5981;6.7261,-1.9305,-1.4064;6.2015,-.978,-1.2832;4.8552,1.4863,-.9933;4.3629,.3171,-.4386;2.718,2.6977,-1.2082;4.0508,2.7326,-.8375;2.3618,4.9779,-.5421;1.838,3.8057,-1.034;1.7131,5.8503,-.4158;2.1994,1.5441,-1.7171;3.1794,.3499,.241;1.7929,.3414,-.6597;.6558,.6991,.2245;1.7808,-.9137,-1.5045;1.08,-2.4671,-1.3422;1.8247,-5.3708,-6.3907;1.5907,-4.9545,-5.4067;.9726,-3.861,-2.9072;1.5763,-3.5766,-5.2294;1.327,-5.8015,-4.3278;1.0321,-5.2488,-3.0872;1.2771,-2.9995,-3.9859;1.7907,-2.894,-6.0553;1.3641,-6.8873,-4.4466;.861,-5.8974,-2.2238;.6019,-3.3353,-1.6433;-.4105,-3.8067,-.9041;-.783,-4.7908,-1.2023;-.4237,-3.5601,.5567;-.491,-3.1903,3.3327;-.8119,-4.6069,1.4027;-.08,-2.3234,1.1135;-.1131,-2.1419,2.4927;-.8377,-4.4253,2.7837;-1.0579,-5.585,.9791;.1948,-1.4697,.4913;.1672,-1.1665,2.8999;-1.1096,-5.2611,3.434;-.5054,-3.0504,4.4175;1.2407,-1.6634,-3.919;1.4507,-1.2962,-3.0142;.3816,3.6181,-1.257;-2.1564,-2.8535,-1.6839;-2.9487,-3.0852,-.5544;-3.0823,-2.2807,.4482;-3.8144,-.748,.8431;-4.9936,-.3914,-.5563;-2.5014,.5284,1.1468;-4.7056,-1.1369,2.4423;-3.4935,-4.2841,-.4139;-4.241,-4.5734,.7578;-4.4798,-.2791,-1.5234;-5.523,.5584,-.372;-5.7457,-1.1947,-.6524;-1.7856,.7072,.3216;-1.8904,.2449,2.0227;-3.0028,1.4805,1.3835;-5.1531,-.2218,2.8668;-5.5139,-1.8757,2.3019;-3.9946,-1.5395,3.1836;-5.1591,-3.9633,.7901;-3.6409,-4.3922,1.663;-4.5068,-5.6364,.6816;4.3456,-2.1861,-.1255;4.1495,-3.24,-1.0289;3.4577,-4.3853,-.6533;2.9745,-4.4739,.6471;3.1789,-3.4608,1.5793;3.8563,-2.3144,1.1831;4.4983,-3.1384,-2.0597;3.2688,-5.189,-1.3659;2.1924,-5.6477,1.0395;2.7811,-3.5683,2.5893;3.9915,-1.4972,1.8937;-.5126,3.9859,-.2424;-1.8683,3.7047,-.3461;-2.3253,3.0417,-1.4801;-1.4722,2.7012,-2.5265;-.1207,2.9973,-2.4108;-.1289,4.4497,.6697;-2.5648,3.9596,.453;-3.735,2.65,-1.5548;-1.8681,2.1936,-3.4068;.5599,2.7109,-3.2137;2.0771,-5.8844,2.2211;1.6882,-6.3136,.1541;-4.1179,2.0946,-2.5619;-4.4408,2.8844,-.5925;6.7565,.1879,-1.8722;6.0625,1.4285,-1.7651;7.9682,.1259,-2.6143;8.4607,1.2354,-3.2553;8.4963,-.8307,-2.6756;9.3909,1.1753,-3.8273;6.5818,2.5503,-2.4709;7.7479,2.4566,-3.1921;6.0386,3.4969,-2.4434;8.1246,3.3327,-3.7276;4.5704,3.9353,-.2546;3.7225,5.0772,-.1509;5.8922,4.0318,.2643;6.3586,5.2072,.8023;6.5407,3.1538,.239;7.3777,5.2552,1.1963;4.239,6.2838,.3973;5.5302,6.3538,.8581;3.5805,7.156,.4567;5.9154,7.2854,1.2817;-2.4172,-3.6998,-2.9138;-2.6363,-4.7498,-2.6668;-3.2798,-3.2977,-3.4781;-1.546,-3.6753,-3.5874;-1.6823,-1.4499,-1.9588;-2.4584,-.8559,-2.4762;-1.3813,-.9095,-1.0491;-.8047,-1.4771,-2.6246;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662194081697</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007185805301 0.000722461189 0.026151585804 0.005337962213</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037738390 -0.002841349 0.000076657 0.000176526 0.000242828 0.000270186 0.000318650 0.000388088 0.000419905 0.000503015 0.000637660 0.000759118 0.000779595 0.000832516 0.000900134 0.001004392 0.001030844 0.001176494 0.001236604 0.001281039 0.001410105 0.001416756 0.001493975 0.001556069 0.001753594 0.001796038 0.001943486 0.002155209 0.002680452 0.003005001 0.003237689 0.003453585 0.003939897 0.004120868 0.004395306 0.004744917 0.004808052 0.005398521 0.005576917 0.005945138 0.006570497 0.006848276 0.007256868 0.007327065 0.007782695 0.008222654 0.008703957 0.009199233 0.009736965 0.010035389 0.010273391 0.010557654 0.012551380 0.012748488 0.013302607 0.014246459 0.014512159 0.014640753 0.015233052 0.015291981 0.015816500 0.016209153 0.016422537 0.017171892 0.017474740 0.018324803 0.019174090 0.020296598 0.021065852 0.022201242 0.023006717 0.023210300 0.024529053 0.025588436 0.025959303 0.026493273 0.026730318 0.027761478 0.029644750 0.030411798 0.031005350 0.031971292 0.032679273 0.034516178 0.036969704 0.037882099 0.038638864 0.039019567 0.039708585 0.040642751 0.041525719 0.044410989 0.045263644 0.046124705 0.049668028 0.050432181 0.050666494 0.051322769 0.051557935 0.051747162 0.051801036 0.052281466 0.052386795 0.052543125 0.053799411 0.054713085 0.056492399 0.056837456 0.056966660 0.057220334 0.057598205 0.058450849 0.059213524 0.059793134 0.060390676 0.060548051 0.061437825 0.061692140 0.064549576 0.064615324 0.065530780 0.067703619 0.068076609 0.069305791 0.071598440 0.072647468 0.076376535 0.076950142 0.080074097 0.081037781 0.082085811 0.086310190 0.089452500 0.090800796 0.092598584 0.092839765 0.094182431 0.095135219 0.095305415 0.095891336 0.096394161 0.096898992 0.098334081 0.098823816 0.099434373 0.101162234 0.101685268 0.102070234 0.102608138 0.103352048 0.103932962 0.104413769 0.106496328 0.107363961 0.108438931 0.108780909 0.110120967 0.112535409 0.113339690 0.115979750 0.116452144 0.117150736 0.119427163 0.122765608 0.125627823 0.126412829 0.127594004 0.128211126 0.131670087 0.133057665 0.135146169 0.136691983 0.141962510 0.144410735 0.145710684 0.146672407 0.148466113 0.148529053 0.152480693 0.157235791 0.159767631 0.169722419 0.173851845 0.174650194 0.180360959 0.183156438 0.185166803 0.185930132 0.188031600 0.190113198 0.201425094 0.202138289 0.203351940 0.204707333 0.206776002 0.207127648 0.208889711 0.209535149 0.212250203 0.215092830 0.216536001 0.224684184 0.231450538 0.232382847 0.232976751 0.234906123 0.243992507 0.248010872 0.254243580 0.254986842 0.256667779 0.258697078 0.271367334 0.276199776 0.289392687 0.295224641 0.297176968 0.299237007 0.303864905 0.305849211 0.307520785 0.311348205 0.320027330 0.321780811 0.324716994 0.327674148 0.344834030 0.346688609 0.348706534 0.350535045 0.354667994 0.358794952 0.363836240 0.367991165 0.379607240 0.382254959 0.404662007 0.425447069 0.430033320 0.444321145 0.462805842 0.462995658 0.474426078 0.475148799 0.477886667 0.480335261 0.498020137 0.506706827 0.541279060 0.561757800 0.566718557 0.570881676 0.583250612 0.604171826 0.618113017 0.636265962 0.642990451 0.665267365 0.670411097 0.679952924 0.681288764 0.689766307 0.691567240 0.704222180 0.704448905 0.704962402 0.713749551 0.737080031 0.750679061 0.771572436 0.775827336 0.797867071 0.807094935 0.814848580 0.815620079 0.818093812 0.820038532 0.820842061 0.829339914 0.830618201 0.840489743 0.842676166 0.844560928 0.848572761 0.848757461 0.856306640 0.859190122 0.867334067 0.871780166 0.874880356 0.886423720 0.887701639 0.892726684 0.894405706 0.914935229 0.923900963 0.930916213 0.933761717 0.958346727 0.969143131 0.975824621 0.989119451 0.999612244 1.012923283 1.034010232 1.042605246 1.049151866 1.055209004 1.072787197 1.084181832 1.088640700 1.109989768 1.110584592 1.116100918 1.122411366 1.123318253 1.134003015 1.142197293 1.161147210 1.168704730 1.172569798 1.173188297 1.200373210 1.203669167 1.214581272 1.247151187 1.263427974 1.292038459 1.295709049 1.314090984 1.326125959 1.326445351 1.330136551 1.334415744 1.336995388 1.340935278 1.345761751 1.362019960 1.377429618 1.378856405 1.380939276 1.381570751 1.557356880 1.664735711 1.671888911</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">32</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0071848" y3="-0.94355107" z3="-0.60050603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.72285073" y3="-1.93124005" z3="-1.40917699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.19852027" y3="-0.97857626" z3="-1.28577465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.85334525" y3="1.48606828" z3="-0.99478485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.36048927" y3="0.31692848" z3="-0.440581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71685244" y3="2.69912693" z3="-1.20785573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04986766" y3="2.73284179" z3="-0.83776063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36243243" y3="4.97865547" z3="-0.53852775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83762107" y3="3.80732134" z3="-1.03139922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7142938" y3="5.85122241" z3="-0.41051797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1973113" y3="1.54639929" z3="-1.71793564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17710303" y3="0.35004955" z3="0.23913288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.79049058" y3="0.34316807" z3="-0.66135764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65402453" y3="0.70140086" z3="0.223431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.77725795" y3="-0.91176468" z3="-1.50646197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08050747" y3="-2.46749167" z3="-1.34324739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82523189" y3="-5.37524275" z3="-6.3894424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.5912172" y3="-4.95829289" z3="-5.405729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97315115" y3="-3.86300037" z3="-2.9070883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.5772955" y3="-3.58031627" z3="-5.22930596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32693921" y3="-5.80450808" z3="-4.32640082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03207692" y3="-5.25092144" z3="-3.08618023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27803319" y3="-3.00225498" z3="-3.98620401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79221707" y3="-2.89822981" z3="-6.05558892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36355167" y3="-6.89041914" z3="-4.44453226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86070026" y3="-5.89904265" z3="-2.22248056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60268917" y3="-3.33606842" z3="-1.64366708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.40765932" y3="-3.80840062" z3="-0.90224571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.78043597" y3="-4.79263021" z3="-1.19924543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42064854" y3="-3.55848521" z3="0.55755701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.48383924" y3="-3.18308326" z3="3.33254754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.80409828" y3="-4.60462838" z3="1.40607699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08070178" y3="-2.31925589" z3="1.11099339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11143975" y3="-2.13502998" z3="2.48980206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.82779583" y3="-4.42020703" z3="2.78673738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.0476072" y3="-5.58433339" z3="0.98487999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.18923145" y3="-1.46586096" z3="0.4862342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16613123" y3="-1.15760215" z3="2.89431251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.09570906" y3="-5.25553361" z3="3.43919461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.49650473" y3="-3.04105645" z3="4.41711296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24221093" y3="-1.66615793" z3="-3.92035491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45048497" y3="-1.29766784" z3="-3.01567234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.38076833" y3="3.62108042" z3="-1.25243444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15768176" y3="-2.85709776" z3="-1.68381465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94749062" y3="-3.08784086" z3="-0.5528386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08227158" y3="-2.28101311" z3="0.44805349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81396978" y3="-0.74904252" z3="0.83999702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.98332181" y3="-0.38909115" z3="-0.56728681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49816267" y3="0.52339361" z3="1.15286284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.71770469" y3="-1.13572056" z3="2.43079386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.48963511" y3="-4.28797368" z3="-0.40900282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.23511736" y3="-4.57658021" z3="0.76372217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.45366781" y3="-0.27851362" z3="-1.53138467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.51711198" y3="0.56308205" z3="-0.3910083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.73544556" y3="-1.19219005" z3="-0.67404676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.78782996" y3="0.69700654" z3="0.33461589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.8991576" y3="0.24593456" z3="2.03691402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00697382" y3="1.48440046" z3="1.36966031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.17010859" y3="-0.21722727" z3="2.84885718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.52704048" y3="-1.87195851" z3="2.2842548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.01412781" y3="-1.53830345" z3="3.18297049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.15409408" y3="-3.96789197" z3="0.79695173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.63422797" y3="-4.39370826" z3="1.667716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.49954138" y3="-5.63963617" z3="0.68891118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.34288725" y3="-2.18651836" z3="-0.1276841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14813317" y3="-3.24112865" z3="-1.03056103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45779474" y3="-4.387137" z3="-0.65444804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97462171" y3="-4.47559548" z3="0.64593323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17730207" y3="-3.46164217" z3="1.57757004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.85334053" y3="-2.31463163" z3="1.18079957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49716326" y3="-3.1396995" z3="-2.06138089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27007937" y3="-5.19145244" z3="-1.36664463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.19450334" y3="-5.65047218" z3="1.0390135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77946563" y3="-3.56903285" z3="2.58754135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.98730138" y3="-1.49687043" z3="1.89101652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.51120108" y3="3.98721965" z3="-0.23528391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.867348" y3="3.707422" z3="-0.33702217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.32686045" y3="3.04784081" z3="-1.47171184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.47617027" y3="2.70972594" z3="-2.52114916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.12404534" y3="3.00369154" z3="-2.40692894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.12550954" y3="4.44862944" z3="0.67707601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.56236174" y3="3.96175406" z3="0.46339139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.73777304" y3="2.66020901" z3="-1.54619636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.87441988" y3="2.20572822" z3="-3.40246833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.55480559" y3="2.71860598" z3="-3.21177589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08091061" y3="-5.88765907" z3="2.22057037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.68994242" y3="-6.31672005" z3="0.1539925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.127006" y3="2.11817733" z3="-2.56067875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43975476" y3="2.8873325" z3="-0.57936204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.75393961" y3="0.18725295" z3="-1.87447629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0605376" y3="1.42812406" z3="-1.76684691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.96562262" y3="0.12499148" z3="-2.61657039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.45862634" y3="1.23457399" z3="-3.25712793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.49327604" y3="-0.83176987" z3="-2.67834585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.3887483" y3="1.17433876" z3="-3.82903279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.58028009" y3="2.54997981" z3="-2.4720401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74634665" y3="2.4561209" z3="-3.19328605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03759034" y3="3.49682108" z3="-2.44410002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12346681" y3="3.33226948" z3="-3.72834822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57055815" y3="3.93452038" z3="-0.25383159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72348466" y3="5.07682899" z3="-0.14835451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89267255" y3="4.02959246" z3="0.26455725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.3601732" y3="5.20416728" z3="0.80353462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54060052" y3="3.15126307" z3="0.23808911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.37951923" y3="5.25103475" z3="1.19706376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.24100674" y3="6.28254492" z3="0.40078479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.53251365" y3="6.35121822" z3="0.86089645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.58315663" y3="7.15504702" z3="0.46147388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.91861428" y3="7.28217402" z3="1.28527408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41712487" y3="-3.7076208" z3="-2.91106754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.63282442" y3="-4.75773713" z3="-2.66142383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28163008" y3="-3.30938877" z3="-3.47507916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54695806" y3="-3.68216989" z3="-3.58572126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68548586" y3="-1.45437159" z3="-1.9637388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46007893" y3="-0.86771803" z3="-2.49229246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.39431396" y3="-0.90600842" z3="-1.05536135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80241616" y3="-1.48262681" z3="-2.62272766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0072,-.9436,-.6005;6.7229,-1.9312,-1.4092;6.1985,-.9786,-1.2858;4.8533,1.4861,-.9948;4.3605,.3169,-.4406;2.7169,2.6991,-1.2079;4.0499,2.7328,-.8378;2.3624,4.9787,-.5385;1.8376,3.8073,-1.0314;1.7143,5.8512,-.4105;2.1973,1.5464,-1.7179;3.1771,.35,.2391;1.7905,.3432,-.6614;.654,.7014,.2234;1.7773,-.9118,-1.5065;1.0805,-2.4675,-1.3432;1.8252,-5.3752,-6.3894;1.5912,-4.9583,-5.4057;.9732,-3.863,-2.9071;1.5773,-3.5803,-5.2293;1.3269,-5.8045,-4.3264;1.0321,-5.2509,-3.0862;1.278,-3.0023,-3.9862;1.7922,-2.8982,-6.0556;1.3636,-6.8904,-4.4445;.8607,-5.899,-2.2225;.6027,-3.3361,-1.6437;-.4077,-3.8084,-.9022;-.7804,-4.7926,-1.1992;-.4206,-3.5585,.5576;-.4838,-3.1831,3.3325;-.8041,-4.6046,1.4061;-.0807,-2.3193,1.111;-.1114,-2.135,2.4898;-.8278,-4.4202,2.7867;-1.0476,-5.5843,.9849;.1892,-1.4659,.4862;.1661,-1.1576,2.8943;-1.0957,-5.2555,3.4392;-.4965,-3.0411,4.4171;1.2422,-1.6662,-3.9204;1.4505,-1.2977,-3.0157;.3808,3.6211,-1.2524;-2.1577,-2.8571,-1.6838;-2.9475,-3.0878,-.5528;-3.0823,-2.281,.4481;-3.814,-.749,.84;-4.9833,-.3891,-.5673;-2.4982,.5234,1.1529;-4.7177,-1.1357,2.4308;-3.4896,-4.288,-.409;-4.2351,-4.5766,.7637;-4.4537,-.2785,-1.5314;-5.5171,.5631,-.391;-5.7354,-1.1922,-.674;-1.7878,.697,.3346;-1.8992,.2459,2.0369;-3.007,1.4844,1.3697;-5.1701,-.2172,2.8489;-5.527,-1.872,2.2843;-4.0141,-1.5383,3.183;-5.1541,-3.9679,.797;-3.6342,-4.3937,1.6677;-4.4995,-5.6396,.6889;4.3429,-2.1865,-.1277;4.1481,-3.2411,-1.0306;3.4578,-4.3871,-.6544;2.9746,-4.4756,.6459;3.1773,-3.4616,1.5776;3.8533,-2.3146,1.1808;4.4972,-3.1397,-2.0614;3.2701,-5.1915,-1.3666;2.1945,-5.6505,1.039;2.7795,-3.569,2.5875;3.9873,-1.4969,1.891;-.5112,3.9872,-.2353;-1.8673,3.7074,-.337;-2.3269,3.0478,-1.4717;-1.4762,2.7097,-2.5211;-.124,3.0037,-2.4069;-.1255,4.4486,.6771;-2.5624,3.9618,.4634;-3.7378,2.6602,-1.5462;-1.8744,2.2057,-3.4025;.5548,2.7186,-3.2118;2.0809,-5.8877,2.2206;1.6899,-6.3167,.154;-4.127,2.1182,-2.5607;-4.4398,2.8873,-.5794;6.7539,.1873,-1.8745;6.0605,1.4281,-1.7668;7.9656,.125,-2.6166;8.4586,1.2346,-3.2571;8.4933,-.8318,-2.6783;9.3887,1.1743,-3.829;6.5803,2.55,-2.472;7.7463,2.4561,-3.1933;6.0376,3.4968,-2.4441;8.1235,3.3323,-3.7283;4.5706,3.9345,-.2538;3.7235,5.0768,-.1484;5.8927,4.0296,.2646;6.3602,5.2042,.8035;6.5406,3.1513,.2381;7.3795,5.251,1.1971;4.241,6.2825,.4008;5.5325,6.3512,.8609;3.5832,7.155,.4615;5.9186,7.2822,1.2853;-2.4171,-3.7076,-2.9111;-2.6328,-4.7577,-2.6614;-3.2816,-3.3094,-3.4751;-1.547,-3.6822,-3.5857;-1.6855,-1.4544,-1.9637;-2.4601,-.8677,-2.4923;-1.3943,-.906,-1.0554;-.8024,-1.4826,-2.6227;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662230401655</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008308622773 0.000730583062 0.031358011024 0.005337583088</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037755201 -0.003189819 0.000077151 0.000177007 0.000245132 0.000271811 0.000320513 0.000388482 0.000420151 0.000503637 0.000637668 0.000759503 0.000781439 0.000832798 0.000904451 0.001004877 0.001035160 0.001177256 0.001236619 0.001282728 0.001412306 0.001416911 0.001493950 0.001562111 0.001753591 0.001796122 0.001943663 0.002166519 0.002688277 0.003005300 0.003237526 0.003454601 0.003941591 0.004124107 0.004395402 0.004745983 0.004819674 0.005397959 0.005578296 0.005945000 0.006571892 0.006848361 0.007269679 0.007373532 0.007804477 0.008247404 0.008705241 0.009205833 0.009738447 0.010082281 0.010291849 0.010839867 0.012553362 0.012752919 0.013310075 0.014247437 0.014533849 0.014649642 0.015237994 0.015292107 0.015820105 0.016209043 0.016422472 0.017185071 0.017474782 0.018332894 0.019229368 0.020299388 0.021068459 0.022201272 0.023008074 0.023212886 0.024529964 0.025589563 0.025959729 0.026494128 0.026730326 0.027761552 0.029648981 0.030411975 0.031009963 0.031970852 0.032681868 0.034558393 0.036974089 0.037895342 0.038750869 0.039028395 0.039727033 0.040653451 0.041599418 0.044674460 0.045264975 0.046124721 0.049668333 0.050603215 0.050668511 0.051322785 0.051557935 0.051799239 0.051841653 0.052281475 0.052386793 0.052543083 0.053799415 0.054713068 0.056492398 0.056837510 0.056967302 0.057220353 0.057599962 0.058455701 0.059213681 0.059807758 0.060394455 0.060558521 0.061438595 0.061693292 0.064550833 0.064619069 0.065530814 0.067705081 0.068077703 0.069305777 0.071599305 0.072647509 0.076379361 0.076955680 0.080078848 0.081045392 0.082086080 0.086310900 0.089453376 0.090802251 0.092599414 0.092839759 0.094183946 0.095136038 0.095306167 0.095892878 0.096420246 0.096906368 0.098403444 0.099118420 0.099434388 0.101187889 0.101915513 0.102515422 0.102810876 0.103417869 0.104002686 0.104623841 0.106496474 0.107402239 0.108491472 0.108878118 0.110132413 0.112535612 0.113347005 0.115980109 0.116452193 0.117150752 0.119428753 0.122767712 0.125629776 0.127330514 0.127597326 0.128219746 0.131709967 0.133065528 0.135159951 0.136691837 0.141962534 0.144410986 0.145712045 0.146673062 0.148504492 0.149374268 0.152482827 0.157236556 0.159767738 0.169727806 0.173851487 0.174657227 0.180363114 0.183157401 0.185167219 0.185990041 0.188031285 0.190149563 0.201485275 0.202261456 0.203380810 0.204721983 0.206776786 0.207127833 0.208893040 0.209540069 0.212252680 0.215094122 0.216537024 0.224685069 0.231451108 0.232383631 0.232980458 0.234906838 0.243995842 0.248011240 0.254244905 0.254986830 0.256667871 0.258698981 0.271367354 0.276206774 0.289394792 0.295232286 0.297205469 0.299239630 0.303869033 0.305850126 0.307521031 0.311366887 0.320030775 0.321784500 0.324719046 0.327684286 0.344884178 0.346768001 0.348839074 0.350539666 0.354668581 0.358799636 0.363836283 0.367991940 0.379707050 0.382456093 0.404662473 0.425446144 0.430033412 0.444321561 0.462806456 0.462995778 0.474427310 0.475150789 0.477886698 0.480355065 0.498020133 0.506716218 0.541282743 0.561772080 0.566718835 0.570899479 0.583252178 0.604172308 0.618279555 0.636389543 0.642995950 0.665267671 0.670418306 0.679967366 0.681289022 0.689771219 0.691567829 0.704232087 0.704608427 0.705097542 0.713749613 0.737081175 0.750679061 0.771572441 0.775827355 0.797869591 0.807871271 0.815335303 0.815634207 0.818102239 0.820039112 0.820872083 0.829348655 0.830622603 0.840491836 0.842841122 0.844568792 0.848595706 0.850859037 0.856307883 0.859190484 0.867334180 0.871781731 0.874897056 0.886470949 0.887701625 0.893429583 0.898644257 0.914986476 0.923901365 0.930927207 0.933779977 0.958346967 0.969143355 0.975824776 0.989119558 0.999612243 1.012925103 1.034010286 1.042605551 1.049151911 1.055209136 1.072792686 1.084181846 1.088640718 1.109989801 1.110584603 1.116101038 1.122411369 1.123318250 1.134003020 1.142197704 1.161147205 1.168704839 1.172570211 1.173188584 1.200373420 1.203671917 1.214583498 1.247159028 1.263904720 1.292091388 1.295710461 1.314094026 1.326129976 1.326447936 1.330136772 1.334416425 1.337115131 1.340940376 1.345761743 1.362021343 1.377468383 1.378858688 1.380939477 1.381572290 1.557358783 1.665201560 1.671894429</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">33</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.0040419" y3="-0.94391072" z3="-0.60268536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.71943591" y3="-1.93200749" z3="-1.41151075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.19537545" y3="-0.97920439" z3="-1.28801719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.85134901" y3="1.48584902" z3="-0.99623635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.35779899" y3="0.31676746" z3="-0.44246902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71567203" y3="2.7006734" z3="-1.20754339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04889717" y3="2.73310204" z3="-0.83806685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36314878" y3="4.97957197" z3="-0.53505027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83722786" y3="3.80910479" z3="-1.02880376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71554418" y3="5.85228439" z3="-0.40532491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.19516154" y3="1.54885204" z3="-1.71884607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17438265" y3="0.35033425" z3="0.2373065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7877425" y3="0.34501229" z3="-0.66321466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65122256" y3="0.70365667" z3="0.22150977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.77368967" y3="-0.9095907" z3="-1.50868302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08065044" y3="-2.46763675" z3="-1.34436241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.8256374" y3="-5.3792674" z3="-6.3883864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59166731" y3="-4.96167635" z3="-5.4049276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97382049" y3="-3.86468565" z3="-2.9068243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57795595" y3="-3.58360146" z3="-5.22935382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32719839" y3="-5.80717255" z3="-4.32502961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03250391" y3="-5.25274237" z3="-3.08514523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27871659" y3="-3.0046803" z3="-3.98660471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79299878" y3="-2.90203938" z3="-6.05607973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36356695" y3="-6.89317825" z3="-4.44246407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.8610547" y3="-5.90036935" z3="-2.22106641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60366926" y3="-3.33701785" z3="-1.64361078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.40676087" y3="-3.80840887" z3="-0.90178792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.77792871" y3="-4.79413096" z3="-1.19625475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41871366" y3="-3.55614449" z3="0.55790635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47749935" y3="-3.17544476" z3="3.33245837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.7965791" y3="-4.60208437" z3="1.40943807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08211056" y3="-2.31473187" z3="1.10828595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11064793" y3="-2.12771197" z3="2.48677042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.81813644" y3="-4.41492328" z3="2.78985532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.03708517" y3="-5.58373799" z3="0.99088213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.18383496" y3="-1.46193945" z3="0.48132743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.16415557" y3="-1.14837955" z3="2.88847927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.08177745" y3="-5.24991377" z3="3.44458762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48857074" y3="-3.03126267" z3="4.41677309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2431181" y3="-1.66851984" z3="-3.92195455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44980089" y3="-1.29882197" z3="-3.01742999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37992038" y3="3.62411559" z3="-1.24796906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15730939" y3="-2.86197393" z3="-1.68438709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94665947" y3="-3.09100055" z3="-0.55256484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08450746" y3="-2.28035358" z3="0.44447507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81538965" y3="-0.74840614" z3="0.83330502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.97346952" y3="-0.38701456" z3="-0.58216184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50318221" y3="0.52415469" z3="1.15853303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.73090359" y3="-1.13406012" z3="2.41864611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.48447295" y3="-4.29280944" z3="-0.40392014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.22852665" y3="-4.57986993" z3="0.77026138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.44674721" y3="-0.27081232" z3="-1.54058934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.50802785" y3="0.56273073" z3="-0.40431089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.72328146" y3="-1.19070037" z3="-0.69273352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.75647195" y3="0.68526415" z3="0.35067495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.91918479" y3="0.24972064" z3="2.05334536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00862156" y3="1.48652716" z3="1.36086093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.18198974" y3="-0.21500534" z3="2.83351521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.54045611" y3="-1.86880731" z3="2.26784372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.03349512" y3="-1.53797997" z3="3.17404129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.14807509" y3="-3.97213199" z3="0.80312757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.62684781" y3="-4.394281" z3="1.67344618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.4916547" y3="-5.64363982" z3="0.69799713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.34000692" y3="-2.18692916" z3="-0.12967054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1467769" y3="-3.24230287" z3="-1.03201063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45791693" y3="-4.38902501" z3="-0.65537878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97463094" y3="-4.4774025" z3="0.64495931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17546806" y3="-3.46252201" z3="1.57598423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.85004663" y3="-2.31481717" z3="1.17869473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49605818" y3="-3.14110426" z3="-2.06277127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27153197" y3="-5.19405819" z3="-1.36711752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.19645577" y3="-5.65332886" z3="1.03860561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77744588" y3="-3.56978464" z3="2.5859097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.98272349" y3="-1.49645897" z3="1.88845952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50996803" y3="3.98830481" z3="-0.22830185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86666571" y3="3.71055353" z3="-0.32879703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3290312" y3="3.05533494" z3="-1.46505882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.48014935" y3="2.71841613" z3="-2.51615299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.12739441" y3="3.01014391" z3="-2.40314491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1221659" y3="4.446759" z3="0.68473005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55995299" y3="3.96335768" z3="0.47371187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.7405315" y3="2.66990446" z3="-1.53855421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.88039385" y3="2.21727422" z3="-3.39808452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.5498528" y3="2.72653626" z3="-3.20988491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08488265" y3="-5.89129197" z3="2.22028042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.69139741" y3="-6.31970426" z3="0.15392775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.12998519" y3="2.12998964" z3="-2.549968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44117166" y3="2.89380938" z3="-0.57074084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.75126873" y3="0.18648853" z3="-1.87650779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05844631" y3="1.42762322" z3="-1.76842005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.96292645" y3="0.12393137" z3="-2.6186406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.45644674" y3="1.23353394" z3="-3.25876644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.49015241" y3="-0.83304263" z3="-2.68077512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38655321" y3="1.17309896" z3="-3.83068068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57870876" y3="2.54951748" z3="-2.47318128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74473866" y3="2.45539553" z3="-3.19445098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03647256" y3="3.4966081" z3="-2.44483298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12229414" y3="3.33158076" z3="-3.72914919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57078284" y3="3.93377629" z3="-0.25310256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72456625" y3="5.07654428" z3="-0.14590362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89322588" y3="4.02740273" z3="0.26473756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.36183233" y3="5.20111697" z3="0.80464056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54052068" y3="3.14864842" z3="0.23717919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.38141011" y3="5.24686527" z3="1.19770184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.24320775" y3="6.2813626" z3="0.40415362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.53502337" y3="6.34870051" z3="0.86358482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.58595681" y3="7.15422637" z3="0.46612637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.92200424" y3="7.27896608" z3="1.28867925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41669973" y3="-3.71610663" z3="-2.90919129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.62899133" y3="-4.76620934" z3="-2.65624152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28339123" y3="-3.32193323" z3="-3.47286086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54763334" y3="-3.6898445" z3="-3.5852401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68873367" y3="-1.45895309" z3="-1.96924745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46144829" y3="-0.87805054" z3="-2.50566813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4051347" y3="-0.90501063" z3="-1.06250112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80150342" y3="-1.48716253" z3="-2.62238972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.004,-.9439,-.6027;6.7194,-1.932,-1.4115;6.1954,-.9792,-1.288;4.8513,1.4858,-.9962;4.3578,.3168,-.4425;2.7157,2.7007,-1.2075;4.0489,2.7331,-.8381;2.3631,4.9796,-.5351;1.8372,3.8091,-1.0288;1.7155,5.8523,-.4053;2.1952,1.5489,-1.7188;3.1744,.3503,.2373;1.7877,.345,-.6632;.6512,.7037,.2215;1.7737,-.9096,-1.5087;1.0807,-2.4676,-1.3444;1.8256,-5.3793,-6.3884;1.5917,-4.9617,-5.4049;.9738,-3.8647,-2.9068;1.578,-3.5836,-5.2294;1.3272,-5.8072,-4.325;1.0325,-5.2527,-3.0851;1.2787,-3.0047,-3.9866;1.793,-2.902,-6.0561;1.3636,-6.8932,-4.4425;.8611,-5.9004,-2.2211;.6037,-3.337,-1.6436;-.4068,-3.8084,-.9018;-.7779,-4.7941,-1.1963;-.4187,-3.5561,.5579;-.4775,-3.1754,3.3325;-.7966,-4.6021,1.4094;-.0821,-2.3147,1.1083;-.1106,-2.1277,2.4868;-.8181,-4.4149,2.7899;-1.0371,-5.5837,.9909;.1838,-1.4619,.4813;.1642,-1.1484,2.8885;-1.0818,-5.2499,3.4446;-.4886,-3.0313,4.4168;1.2431,-1.6685,-3.922;1.4498,-1.2988,-3.0174;.3799,3.6241,-1.248;-2.1573,-2.862,-1.6844;-2.9467,-3.091,-.5526;-3.0845,-2.2804,.4445;-3.8154,-.7484,.8333;-4.9735,-.387,-.5822;-2.5032,.5242,1.1585;-4.7309,-1.1341,2.4186;-3.4845,-4.2928,-.4039;-4.2285,-4.5799,.7703;-4.4467,-.2708,-1.5406;-5.508,.5627,-.4043;-5.7233,-1.1907,-.6927;-1.7565,.6853,.3507;-1.9192,.2497,2.0533;-3.0086,1.4865,1.3609;-5.182,-.215,2.8335;-5.5405,-1.8688,2.2678;-4.0335,-1.538,3.174;-5.1481,-3.9721,.8031;-3.6268,-4.3943,1.6734;-4.4917,-5.6436,.698;4.34,-2.1869,-.1297;4.1468,-3.2423,-1.032;3.4579,-4.389,-.6554;2.9746,-4.4774,.645;3.1755,-3.4625,1.576;3.85,-2.3148,1.1787;4.4961,-3.1411,-2.0628;3.2715,-5.1941,-1.3671;2.1965,-5.6533,1.0386;2.7774,-3.5698,2.5859;3.9827,-1.4965,1.8885;-.51,3.9883,-.2283;-1.8667,3.7106,-.3288;-2.329,3.0553,-1.4651;-1.4801,2.7184,-2.5162;-.1274,3.0101,-2.4031;-.1222,4.4468,.6847;-2.56,3.9634,.4737;-3.7405,2.6699,-1.5386;-1.8804,2.2173,-3.3981;.5499,2.7265,-3.2099;2.0849,-5.8913,2.2203;1.6914,-6.3197,.1539;-4.13,2.13,-2.55;-4.4412,2.8938,-.5707;6.7513,.1865,-1.8765;6.0584,1.4276,-1.7684;7.9629,.1239,-2.6186;8.4564,1.2335,-3.2588;8.4902,-.833,-2.6808;9.3866,1.1731,-3.8307;6.5787,2.5495,-2.4732;7.7447,2.4554,-3.1945;6.0365,3.4966,-2.4448;8.1223,3.3316,-3.7291;4.5708,3.9338,-.2531;3.7246,5.0765,-.1459;5.8932,4.0274,.2647;6.3618,5.2011,.8046;6.5405,3.1486,.2372;7.3814,5.2469,1.1977;4.2432,6.2814,.4042;5.535,6.3487,.8636;3.586,7.1542,.4661;5.922,7.279,1.2887;-2.4167,-3.7161,-2.9092;-2.629,-4.7662,-2.6562;-3.2834,-3.3219,-3.4729;-1.5476,-3.6898,-3.5852;-1.6887,-1.459,-1.9692;-2.4614,-.8781,-2.5057;-1.4051,-.905,-1.0625;-.8015,-1.4872,-2.6224;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662239355566</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009131943390 0.000976807286 0.027674579173 0.005337364374</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037766810 -0.005327853 0.000079085 0.000177352 0.000245386 0.000271743 0.000320707 0.000388571 0.000420425 0.000503761 0.000637994 0.000759613 0.000781697 0.000832767 0.000904535 0.001008203 0.001035577 0.001177286 0.001237140 0.001283942 0.001413385 0.001417278 0.001494884 0.001562686 0.001753632 0.001814039 0.001943879 0.002176954 0.002687670 0.003005330 0.003238554 0.003454997 0.003941858 0.004124201 0.004396227 0.004749289 0.004822007 0.005407268 0.005578235 0.005945187 0.006571735 0.006849237 0.007269785 0.007370443 0.007804603 0.008246211 0.008705500 0.009221053 0.009742369 0.010116341 0.010302379 0.011643952 0.012574007 0.012771321 0.013325739 0.014249584 0.014572242 0.014738855 0.015267828 0.015292209 0.015835911 0.016209785 0.016422758 0.017192936 0.017477121 0.018341637 0.019229457 0.020301167 0.021068481 0.022201271 0.023009489 0.023215549 0.024530539 0.025591197 0.025960088 0.026494559 0.026730307 0.027761538 0.029654589 0.030412150 0.031015519 0.031970975 0.032683811 0.034613481 0.036973477 0.037901160 0.038831729 0.039026830 0.039913380 0.040653273 0.041590556 0.044701647 0.045264855 0.046124719 0.049668779 0.050665752 0.051046992 0.051322766 0.051557940 0.051799734 0.052072362 0.052281531 0.052386793 0.052543218 0.053799418 0.054713353 0.056492411 0.056837576 0.056968895 0.057220396 0.057604199 0.058467281 0.059214544 0.059847977 0.060406914 0.060621669 0.061439755 0.061695019 0.064553218 0.064626715 0.065531634 0.067707300 0.068091011 0.069318406 0.071599422 0.072647524 0.076380525 0.076959153 0.080108180 0.081113911 0.082086073 0.086310846 0.089455205 0.090804625 0.092599428 0.092839765 0.094184151 0.095136063 0.095306169 0.095894320 0.096455528 0.096908869 0.098426504 0.099433167 0.099500291 0.101195072 0.101951430 0.102570814 0.103256126 0.103706707 0.104042091 0.106409306 0.106522202 0.107654237 0.108571841 0.109629423 0.110255490 0.112535777 0.113402166 0.115980397 0.116454545 0.117152212 0.119436154 0.122772404 0.125636662 0.127529023 0.127601233 0.128232602 0.131706200 0.133069083 0.135168443 0.136692538 0.141962539 0.144410981 0.145711778 0.146672594 0.148529154 0.150314409 0.152486927 0.157237514 0.159768890 0.169735525 0.173851285 0.174665516 0.180366014 0.183159952 0.185167824 0.186106072 0.188031600 0.190201431 0.201520860 0.202367440 0.203427284 0.204734289 0.206776968 0.207128072 0.208897731 0.209548912 0.212254783 0.215095207 0.216536647 0.224686352 0.231451763 0.232384691 0.232985547 0.234907804 0.244000130 0.248012435 0.254246844 0.254987010 0.256667897 0.258702093 0.271367459 0.276216222 0.289396834 0.295241390 0.297223146 0.299244601 0.303876237 0.305851023 0.307521115 0.311366366 0.320033403 0.321788193 0.324718905 0.327699647 0.344946102 0.346850410 0.348859428 0.350539356 0.354669990 0.358801869 0.363836623 0.367999735 0.379971014 0.383267824 0.404664832 0.425517881 0.430034145 0.444326044 0.462810981 0.462995963 0.474438699 0.475158377 0.477886796 0.480396096 0.498020153 0.506750081 0.541293205 0.561826995 0.566719702 0.570968582 0.583252220 0.604173470 0.618485589 0.636384670 0.643000723 0.665268097 0.670428007 0.680034230 0.681289029 0.689820270 0.691570550 0.704237356 0.704729108 0.705866844 0.713749650 0.737083271 0.750679063 0.771572440 0.775827396 0.797872094 0.808900926 0.815607691 0.816952893 0.818170775 0.820041167 0.820994637 0.829387838 0.830637604 0.840492083 0.842844885 0.844627444 0.848599884 0.854222217 0.856341343 0.859202430 0.867334291 0.871784800 0.874907197 0.886484784 0.887701888 0.893486814 0.903009495 0.915014399 0.923902294 0.930932614 0.933781621 0.958347043 0.969143772 0.975825122 0.989119744 0.999612243 1.012929569 1.034010495 1.042606016 1.049152208 1.055209583 1.072819547 1.084181845 1.088640738 1.109989819 1.110584605 1.116102646 1.122411374 1.123318245 1.134003026 1.142197770 1.161147202 1.168705033 1.172570594 1.173189093 1.200373733 1.203675969 1.214597353 1.247172977 1.265036569 1.292105529 1.295713047 1.314099926 1.326135912 1.326452527 1.330136963 1.334416426 1.337419091 1.340943166 1.345762861 1.362021565 1.377513242 1.378862271 1.380939624 1.381574432 1.557361703 1.665781632 1.671902443</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">34</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="5.00070658" y3="-0.94426802" z3="-0.60473519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.71583923" y3="-1.93285276" z3="-1.41352446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1920623" y3="-0.97989483" z3="-1.29005609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.84925683" y3="1.48563719" z3="-0.99769372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.35499414" y3="0.31664776" z3="-0.44434835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.7144729" y3="2.70231401" z3="-1.2073475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04787389" y3="2.73340056" z3="-0.8384172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3638771" y3="4.98058554" z3="-0.53165096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.836857" y3="3.81100321" z3="-1.0263388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71683415" y3="5.85345914" z3="-0.4002392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1929875" y3="1.5514461" z3="-1.71995551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17155311" y3="0.35069495" z3="0.23533126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7849425" y3="0.34701644" z3="-0.66529259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64888972" y3="0.70627071" z3="0.21973154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.76994034" y3="-0.90724966" z3="-1.51122634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08050146" y3="-2.46733556" z3="-1.34572077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82628119" y3="-5.38355333" z3="-6.3870617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59233501" y3="-4.96522052" z3="-5.40391075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97445723" y3="-3.86629446" z3="-2.90670474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.5786299" y3="-3.58703665" z3="-5.22938723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32782372" y3="-5.80989365" z3="-4.32336731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03314943" y3="-5.25450802" z3="-3.08393161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2793323" y3="-3.00709189" z3="-3.98710365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79368602" y3="-2.90608768" z3="-6.05660393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36411315" y3="-6.89599021" z3="-4.43997743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86176075" y3="-5.90153357" z3="-2.21940033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60432216" y3="-3.33750164" z3="-1.64395781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.40453923" y3="-3.80951549" z3="-0.90041153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.77524816" y3="-4.79577093" z3="-1.19325365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41602472" y3="-3.55422715" z3="0.55857625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47145402" y3="-3.16746602" z3="3.33216407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.78882156" y3="-4.59955111" z3="1.4128443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08330563" y3="-2.31023349" z3="1.10549126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11001631" y3="-2.1202025" z3="2.4835229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.80856237" y3="-4.40935758" z3="2.79290973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.02645315" y3="-5.58296601" z3="0.99688071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.17795211" y3="-1.45783426" z3="0.47579814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1620756" y3="-1.1390241" z3="2.88249045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.06789551" y3="-5.24388894" z3="3.44993575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48108087" y3="-3.02098553" z3="4.41619481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24375141" y3="-1.67093499" z3="-3.9237591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44888522" y3="-1.29986482" z3="-3.0194468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37916789" y3="3.62723827" z3="-1.24372646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15823279" y3="-2.86642293" z3="-1.68459821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94518139" y3="-3.09476165" z3="-0.55072219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08244563" y3="-2.28518569" z3="0.4474441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81354742" y3="-0.74728863" z3="0.82724226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.96419254" y3="-0.38244459" z3="-0.59399337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.4960772" y3="0.5192423" z3="1.16006482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.74310215" y3="-1.13111532" z3="2.40559337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.48130402" y3="-4.29637152" z3="-0.40051032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.22202404" y3="-4.58319436" z3="0.77605932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.42677279" y3="-0.26320713" z3="-1.55039433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.50203811" y3="0.56392402" z3="-0.41410277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.71092886" y3="-1.18834066" z3="-0.71360155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.76605932" y3="0.68272507" z3="0.36313441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.92855699" y3="0.24961855" z3="2.07284808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00620423" y3="1.47944202" z3="1.35572365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.19410903" y3="-0.21221727" z3="2.81973352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.55427558" y3="-1.86358574" z3="2.24700141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.05163301" y3="-1.53843687" z3="3.16361516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.14300693" y3="-3.97745564" z3="0.80946747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.61876008" y3="-4.39410598" z3="1.67763506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.482871" y3="-5.64785586" z3="0.70682855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33687276" y3="-2.18729309" z3="-0.13146406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14532499" y3="-3.24354469" z3="-1.033166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45801839" y3="-4.39100389" z3="-0.65595713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97449716" y3="-4.47921068" z3="0.6443032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17328811" y3="-3.46327141" z3="1.57460989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.84634573" y3="-2.31486343" z3="1.1767419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49496224" y3="-3.14267026" z3="-2.06383942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27314461" y3="-5.19686619" z3="-1.36715723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.1983149" y3="-5.65619979" z3="1.03855352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77496372" y3="-3.57032308" z3="2.58445216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.97757054" y3="-1.49581868" z3="1.88597913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50861865" y3="3.98972521" z3="-0.22166813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86562768" y3="3.71345691" z3="-0.32048623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.33039816" y3="3.06155164" z3="-1.45749609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.48379956" y3="2.72674181" z3="-2.51120682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.13050428" y3="3.01650443" z3="-2.39951567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.11886493" y3="4.44544702" z3="0.69185108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55740164" y3="3.96510094" z3="0.48359805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.74289446" y3="2.67952798" z3="-1.53024341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.88618899" y3="2.22869246" z3="-3.39394576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.54526529" y3="2.73408454" z3="-3.2078711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08843893" y3="-5.89464532" z3="2.22022884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.69295853" y3="-6.32289489" z3="0.15427743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.14084272" y3="2.15766422" z3="-2.55377726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43800671" y3="2.89133938" z3="-0.55331546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.74845694" y3="0.18561793" z3="-1.87839338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05624772" y3="1.42704498" z3="-1.76996281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.96009371" y3="0.12269058" z3="-2.62053445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.45414398" y3="1.2322515" z3="-3.26032044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.48687602" y3="-0.83450902" z3="-2.68293566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38423343" y3="1.17155136" z3="-3.83223283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57703866" y3="2.54891419" z3="-2.47436832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74302766" y3="2.45444576" z3="-3.19564817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03525596" y3="3.49625764" z3="-2.44569229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.12102659" y3="3.33061164" z3="-3.73006299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57097133" y3="3.93305859" z3="-0.25242757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72565762" y3="5.07632428" z3="-0.14353958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89374416" y3="4.02519417" z3="0.26485343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.36351637" y3="5.19804247" z3="0.80562545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54035766" y3="3.14598095" z3="0.23622523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.38332987" y3="5.24263638" z3="1.19820811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.24548312" y3="6.28024081" z3="0.4073726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.53761537" y3="6.34619908" z3="0.86610277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.58888629" y3="7.15350635" z3="0.47059214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.92553108" y3="7.27577164" z3="1.29186054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41619742" y3="-3.72461157" z3="-2.90692334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.62506991" y3="-4.77467142" z3="-2.65148496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2846335" y3="-3.3344763" z3="-3.47055202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54806316" y3="-3.69754975" z3="-3.58422051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69181261" y3="-1.46373134" z3="-1.97413213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46321237" y3="-0.88928838" z3="-2.52062696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.41710487" y3="-0.90203898" z3="-1.06867093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80014172" y3="-1.49256881" z3="-2.62142457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:5.0007,-.9443,-.6047;6.7158,-1.9329,-1.4135;6.1921,-.9799,-1.2901;4.8493,1.4856,-.9977;4.355,.3166,-.4443;2.7145,2.7023,-1.2073;4.0479,2.7334,-.8384;2.3639,4.9806,-.5317;1.8369,3.811,-1.0263;1.7168,5.8535,-.4002;2.193,1.5514,-1.72;3.1716,.3507,.2353;1.7849,.347,-.6653;.6489,.7063,.2197;1.7699,-.9072,-1.5112;1.0805,-2.4673,-1.3457;1.8263,-5.3836,-6.3871;1.5923,-4.9652,-5.4039;.9745,-3.8663,-2.9067;1.5786,-3.587,-5.2294;1.3278,-5.8099,-4.3234;1.0331,-5.2545,-3.0839;1.2793,-3.0071,-3.9871;1.7937,-2.9061,-6.0566;1.3641,-6.896,-4.44;.8618,-5.9015,-2.2194;.6043,-3.3375,-1.644;-.4045,-3.8095,-.9004;-.7752,-4.7958,-1.1933;-.416,-3.5542,.5586;-.4715,-3.1675,3.3322;-.7888,-4.5996,1.4128;-.0833,-2.3102,1.1055;-.11,-2.1202,2.4835;-.8086,-4.4094,2.7929;-1.0265,-5.583,.9969;.178,-1.4578,.4758;.1621,-1.139,2.8825;-1.0679,-5.2439,3.4499;-.4811,-3.021,4.4162;1.2438,-1.6709,-3.9238;1.4489,-1.2999,-3.0194;.3792,3.6272,-1.2437;-2.1582,-2.8664,-1.6846;-2.9452,-3.0948,-.5507;-3.0824,-2.2852,.4474;-3.8135,-.7473,.8272;-4.9642,-.3824,-.594;-2.4961,.5192,1.1601;-4.7431,-1.1311,2.4056;-3.4813,-4.2964,-.4005;-4.222,-4.5832,.7761;-4.4268,-.2632,-1.5504;-5.502,.5639,-.4141;-5.7109,-1.1883,-.7136;-1.7661,.6827,.3631;-1.9286,.2496,2.0728;-3.0062,1.4794,1.3557;-5.1941,-.2122,2.8197;-5.5543,-1.8636,2.247;-4.0516,-1.5384,3.1636;-5.143,-3.9775,.8095;-3.6188,-4.3941,1.6776;-4.4829,-5.6479,.7068;4.3369,-2.1873,-.1315;4.1453,-3.2435,-1.0332;3.458,-4.391,-.656;2.9745,-4.4792,.6443;3.1733,-3.4633,1.5746;3.8463,-2.3149,1.1767;4.495,-3.1427,-2.0638;3.2731,-5.1969,-1.3672;2.1983,-5.6562,1.0386;2.775,-3.5703,2.5845;3.9776,-1.4958,1.886;-.5086,3.9897,-.2217;-1.8656,3.7135,-.3205;-2.3304,3.0616,-1.4575;-1.4838,2.7267,-2.5112;-.1305,3.0165,-2.3995;-.1189,4.4454,.6919;-2.5574,3.9651,.4836;-3.7429,2.6795,-1.5302;-1.8862,2.2287,-3.3939;.5453,2.7341,-3.2079;2.0884,-5.8946,2.2202;1.693,-6.3229,.1543;-4.1408,2.1577,-2.5538;-4.438,2.8913,-.5533;6.7485,.1856,-1.8784;6.0562,1.427,-1.77;7.9601,.1227,-2.6205;8.4541,1.2323,-3.2603;8.4869,-.8345,-2.6829;9.3842,1.1716,-3.8322;6.577,2.5489,-2.4744;7.743,2.4544,-3.1956;6.0353,3.4963,-2.4457;8.121,3.3306,-3.7301;4.571,3.9331,-.2524;3.7257,5.0763,-.1435;5.8937,4.0252,.2649;6.3635,5.198,.8056;6.5404,3.146,.2362;7.3833,5.2426,1.1982;4.2455,6.2802,.4074;5.5376,6.3462,.8661;3.5889,7.1535,.4706;5.9255,7.2758,1.2919;-2.4162,-3.7246,-2.9069;-2.6251,-4.7747,-2.6515;-3.2846,-3.3345,-3.4706;-1.5481,-3.6975,-3.5842;-1.6918,-1.4637,-1.9741;-2.4632,-.8893,-2.5206;-1.4171,-.902,-1.0687;-.8001,-1.4926,-2.6214;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662227848074</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.013497528906 0.001320556664 0.030262580744 0.005337281055</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037781921 -0.008546904 0.000079062 0.000177548 0.000245853 0.000271766 0.000320733 0.000388639 0.000421084 0.000503818 0.000638461 0.000759619 0.000781696 0.000832746 0.000907401 0.001009925 0.001037356 0.001178130 0.001237423 0.001284454 0.001413941 0.001417554 0.001495610 0.001570286 0.001753657 0.001828828 0.001945635 0.002176667 0.002688484 0.003005642 0.003239224 0.003456175 0.003941981 0.004124617 0.004396280 0.004750059 0.004824646 0.005413810 0.005580439 0.005945172 0.006581477 0.006853618 0.007284633 0.007473955 0.007818121 0.008265016 0.008705525 0.009227472 0.009752847 0.010125031 0.010302702 0.012164001 0.012634415 0.012820459 0.013333540 0.014255543 0.014573415 0.014794885 0.015266485 0.015292726 0.015842954 0.016221570 0.016431024 0.017193933 0.017494218 0.018350302 0.019253133 0.020301436 0.021074261 0.022201413 0.023012396 0.023216892 0.024531376 0.025609607 0.025960779 0.026494715 0.026730426 0.027761634 0.029660654 0.030412645 0.031020550 0.031971161 0.032688439 0.034727209 0.036982320 0.037901265 0.038827611 0.039039717 0.040215271 0.040667651 0.041719311 0.044766608 0.045268237 0.046124779 0.049668974 0.050665896 0.051292770 0.051323897 0.051557940 0.051799814 0.052281388 0.052386748 0.052536146 0.052586015 0.053799601 0.054715150 0.056492542 0.056837573 0.056969630 0.057220512 0.057606204 0.058473531 0.059214622 0.059853895 0.060409678 0.060649653 0.061440279 0.061695016 0.064555242 0.064630891 0.065532074 0.067708281 0.068097259 0.069326105 0.071599469 0.072647504 0.076380343 0.076960236 0.080127277 0.081191106 0.082086873 0.086311814 0.089458050 0.090808159 0.092599573 0.092839757 0.094184185 0.095136212 0.095306185 0.095894362 0.096480858 0.096909388 0.098433030 0.099433635 0.099626831 0.101196295 0.101962848 0.102574624 0.103302415 0.103788849 0.104039703 0.106492941 0.107147578 0.108129238 0.108635660 0.110092799 0.112531491 0.113145479 0.115885973 0.116385957 0.117081637 0.117906431 0.119751830 0.122809640 0.125700345 0.127510895 0.127640617 0.128232526 0.132149814 0.133072450 0.135190496 0.136694378 0.141963055 0.144411087 0.145711842 0.146672140 0.148542914 0.151409388 0.152505032 0.157240121 0.159792836 0.169748446 0.173851170 0.174682483 0.180371770 0.183163949 0.185168924 0.186378685 0.188031258 0.190336804 0.201566674 0.202554780 0.203545799 0.204754617 0.206777121 0.207128521 0.208905105 0.209564129 0.212258347 0.215096735 0.216537344 0.224688329 0.231452611 0.232387716 0.232991412 0.234909204 0.244006981 0.248012464 0.254250310 0.254987247 0.256667908 0.258706450 0.271367435 0.276230671 0.289398497 0.295252686 0.297222017 0.299253731 0.303890923 0.305852101 0.307521114 0.311372650 0.320034567 0.321791386 0.324719821 0.327724233 0.345034728 0.346953012 0.348884312 0.350552265 0.354672822 0.358801689 0.363837186 0.368176038 0.380175925 0.383775452 0.404684310 0.425647370 0.430036845 0.444331209 0.462834950 0.462997784 0.474503777 0.475189352 0.477886954 0.480494539 0.498020151 0.506866113 0.541327427 0.562001813 0.566721677 0.571190048 0.583252537 0.604176134 0.619702538 0.636557031 0.643010272 0.665269506 0.670449822 0.680221825 0.681289261 0.689876123 0.691572290 0.704238565 0.704749087 0.706502727 0.713752991 0.737087591 0.750679068 0.771572441 0.775827561 0.797871885 0.809333303 0.815611188 0.818011033 0.819756801 0.820103005 0.821806198 0.829436633 0.830684801 0.840493320 0.843512909 0.844883981 0.848606529 0.856283993 0.859149025 0.862988284 0.867334910 0.871804233 0.874917465 0.886488066 0.887701820 0.893496518 0.906428259 0.915022117 0.923904357 0.930933657 0.933781982 0.958347035 0.969143774 0.975825754 0.989120576 0.999612265 1.012932209 1.034011456 1.042606719 1.049152256 1.055210026 1.072849594 1.084181875 1.088640737 1.109989857 1.110584611 1.116103797 1.122411380 1.123318242 1.134003072 1.142198612 1.161147281 1.168705427 1.172570755 1.173189776 1.200374167 1.203681861 1.214632542 1.247199444 1.268470808 1.292122303 1.295719543 1.314114002 1.326145300 1.326462566 1.330137187 1.334416599 1.338363907 1.340957373 1.345762841 1.362021454 1.377578309 1.378866300 1.380939997 1.381577975 1.557363921 1.666538772 1.671913667</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">35</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.99716867" y3="-0.94458622" z3="-0.60680656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.71206762" y3="-1.9336451" z3="-1.41558478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.18856201" y3="-0.9805338" z3="-1.29212424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.84697079" y3="1.48543605" z3="-0.99912337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.35190882" y3="0.31654471" z3="-0.44623554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71312894" y3="2.70405154" z3="-1.20698895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04672934" y3="2.73373347" z3="-0.83871029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36456628" y3="4.98167211" z3="-0.52819663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83637827" y3="3.81299855" z3="-1.02375483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71810592" y3="5.8547143" z3="-0.39506459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.19051" y3="1.55415064" z3="-1.72078869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1683447" y3="0.35108939" z3="0.23342086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.78179105" y3="0.34905121" z3="-0.66728327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64550201" y3="0.70850066" z3="0.21762626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7659036" y3="-0.90475126" z3="-1.51376129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08019398" y3="-2.4670366" z3="-1.34735227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82725823" y3="-5.38769147" z3="-6.38589706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59322362" y3="-4.9686121" z3="-5.40309879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97504726" y3="-3.86777252" z3="-2.90679345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.5794289" y3="-3.59030677" z3="-5.22961954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.32862773" y3="-5.81244769" z3="-4.32194501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03384239" y3="-5.25611159" z3="-3.08298123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27991172" y3="-3.00941167" z3="-3.98784532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79452663" y3="-2.90997139" z3="-6.05730957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36494766" y3="-6.89863184" z3="-4.43770111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86246063" y3="-5.90252524" z3="-2.21801128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60493949" y3="-3.33796878" z3="-1.64453119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.40344759" y3="-3.80981678" z3="-0.89990736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.77245175" y3="-4.79745713" z3="-1.19047204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41347855" y3="-3.552358" z3="0.55885921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46533567" y3="-3.15998532" z3="3.33161768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.78123248" y3="-4.59718168" z3="1.41583083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08414637" y3="-2.30623194" z3="1.10264147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1089583" y3="-2.11326624" z3="2.48026285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.79922991" y3="-4.40407859" z3="2.79555401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.0160988" y3="-5.58226882" z3="1.00230683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.17268661" y3="-1.45437266" z3="0.47053121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15996359" y3="-1.13005029" z3="2.87636341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.05469574" y3="-5.238017" z3="3.4547218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.47385457" y3="-3.01118869" z3="4.41532997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2441809" y3="-1.6731955" z3="-3.92571489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4479644" y3="-1.3008709" z3="-3.02167128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37824365" y3="3.63042995" z3="-1.23929954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15738552" y3="-2.87134234" z3="-1.68411812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94388261" y3="-3.09790099" z3="-0.54953408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08275449" y3="-2.28472014" z3="0.44550286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81533052" y3="-0.7504924" z3="0.82534956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.95376758" y3="-0.38121658" z3="-0.60482509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50498277" y3="0.51689836" z3="1.17137044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.75453042" y3="-1.13158512" z3="2.39599614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.47733504" y3="-4.30045036" z3="-0.39605894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.21603958" y3="-4.58683924" z3="0.7815777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.40473598" y3="-0.25833108" z3="-1.55545854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.49532954" y3="0.56758975" z3="-0.43022906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.70127619" y3="-1.18510632" z3="-0.73522251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.73579674" y3="0.66732399" z3="0.37983187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.94357056" y3="0.24937921" z3="2.07197717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00838923" y3="1.48722447" z3="1.34778315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.20865477" y3="-0.20877137" z3="2.80345272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.56684004" y3="-1.86053522" z3="2.23138344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.07073173" y3="-1.53989367" z3="3.16358032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.13806037" y3="-3.98288184" z3="0.81583882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.61177954" y3="-4.39582984" z3="1.68162526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.47482736" y3="-5.65174832" z3="0.71363629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33360287" y3="-2.18764905" z3="-0.13330031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14382543" y3="-3.24478955" z3="-1.03435404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45808935" y3="-4.39298724" z3="-0.65656788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97425885" y3="-4.48098904" z3="0.64358395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17095588" y3="-3.46399914" z3="1.57316887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.84249371" y3="-2.3148955" z3="1.17473447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49387196" y3="-3.14425534" z3="-2.06492369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27482071" y3="-5.19971647" z3="-1.36719432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2000611" y3="-5.65903864" z3="1.03842989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77225838" y3="-3.57080411" z3="2.58290308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.9722274" y3="-1.49516725" z3="1.88344009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.5074783" y3="3.99107103" z3="-0.21481887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86504458" y3="3.71668337" z3="-0.31226046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.33274779" y3="3.06956669" z3="-1.45098506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.48787316" y3="2.73570558" z3="-2.50634093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.13383839" y3="3.02275233" z3="-2.39560565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.11569411" y3="4.44425781" z3="0.69906062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55520683" y3="3.96710988" z3="0.49361129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.74650022" y3="2.69156152" z3="-1.52394215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.89225927" y3="2.24063902" z3="-3.38988632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.54057922" y3="2.7411091" z3="-3.20540268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.09159068" y3="-5.89775198" z3="2.22015446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.69480472" y3="-6.3263548" z3="0.15457686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.14440342" y3="2.17254792" z3="-2.54282274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44033524" y3="2.90035371" z3="-0.54819755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.74545964" y3="0.18477982" z3="-1.88033931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05385969" y3="1.42648857" z3="-1.77152523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.95704299" y3="0.12147269" z3="-2.62255739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.45157972" y3="1.23098301" z3="-3.26205282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.48338885" y3="-0.83594871" z3="-2.68525051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.38161709" y3="1.17001463" z3="-3.8340245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57514798" y3="2.54832755" z3="-2.47562486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.74104936" y3="2.45350593" z3="-3.19699601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03382766" y3="3.49592813" z3="-2.44661533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1194521" y3="3.32964182" z3="-3.73117647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57111228" y3="3.93236506" z3="-0.25173593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72672482" y3="5.07613602" z3="-0.14113497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89423606" y3="4.02298431" z3="0.26492844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.36521758" y3="5.19496161" z3="0.80654115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54015385" y3="3.14330304" z3="0.23520106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.38528266" y3="5.23838917" z3="1.19859885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.24777553" y3="6.27913932" z3="0.41060645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.54024505" y3="6.34370031" z3="0.86857674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.5918498" y3="7.15281612" z3="0.47508789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.92912628" y3="7.27258004" z3="1.29496419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41540415" y3="-3.73246901" z3="-2.90440369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.62107101" y3="-4.78257515" z3="-2.64668224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28567967" y3="-3.34573988" z3="-3.46744408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54824845" y3="-3.70438445" z3="-3.58286282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69461276" y3="-1.46846185" z3="-1.97866415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4643863" y3="-0.90099021" z3="-2.53437891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.42831725" y3="-0.90040317" z3="-1.07482637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79798014" y3="-1.49763804" z3="-2.61926121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9972,-.9446,-.6068;6.7121,-1.9336,-1.4156;6.1886,-.9805,-1.2921;4.847,1.4854,-.9991;4.3519,.3165,-.4462;2.7131,2.7041,-1.207;4.0467,2.7337,-.8387;2.3646,4.9817,-.5282;1.8364,3.813,-1.0238;1.7181,5.8547,-.3951;2.1905,1.5542,-1.7208;3.1683,.3511,.2334;1.7818,.3491,-.6673;.6455,.7085,.2176;1.7659,-.9048,-1.5138;1.0802,-2.467,-1.3474;1.8273,-5.3877,-6.3859;1.5932,-4.9686,-5.4031;.975,-3.8678,-2.9068;1.5794,-3.5903,-5.2296;1.3286,-5.8124,-4.3219;1.0338,-5.2561,-3.083;1.2799,-3.0094,-3.9878;1.7945,-2.91,-6.0573;1.3649,-6.8986,-4.4377;.8625,-5.9025,-2.218;.6049,-3.338,-1.6445;-.4034,-3.8098,-.8999;-.7725,-4.7975,-1.1905;-.4135,-3.5524,.5589;-.4653,-3.16,3.3316;-.7812,-4.5972,1.4158;-.0841,-2.3062,1.1026;-.109,-2.1133,2.4803;-.7992,-4.4041,2.7956;-1.0161,-5.5823,1.0023;.1727,-1.4544,.4705;.16,-1.1301,2.8764;-1.0547,-5.238,3.4547;-.4739,-3.0112,4.4153;1.2442,-1.6732,-3.9257;1.448,-1.3009,-3.0217;.3782,3.6304,-1.2393;-2.1574,-2.8713,-1.6841;-2.9439,-3.0979,-.5495;-3.0828,-2.2847,.4455;-3.8153,-.7505,.8253;-4.9538,-.3812,-.6048;-2.505,.5169,1.1714;-4.7545,-1.1316,2.396;-3.4773,-4.3005,-.3961;-4.216,-4.5868,.7816;-4.4047,-.2583,-1.5555;-5.4953,.5676,-.4302;-5.7013,-1.1851,-.7352;-1.7358,.6673,.3798;-1.9436,.2494,2.072;-3.0084,1.4872,1.3478;-5.2087,-.2088,2.8035;-5.5668,-1.8605,2.2314;-4.0707,-1.5399,3.1636;-5.1381,-3.9829,.8158;-3.6118,-4.3958,1.6816;-4.4748,-5.6517,.7136;4.3336,-2.1876,-.1333;4.1438,-3.2448,-1.0344;3.4581,-4.393,-.6566;2.9743,-4.481,.6436;3.171,-3.464,1.5732;3.8425,-2.3149,1.1747;4.4939,-3.1443,-2.0649;3.2748,-5.1997,-1.3672;2.2001,-5.659,1.0384;2.7723,-3.5708,2.5829;3.9722,-1.4952,1.8834;-.5075,3.9911,-.2148;-1.865,3.7167,-.3123;-2.3327,3.0696,-1.451;-1.4879,2.7357,-2.5063;-.1338,3.0228,-2.3956;-.1157,4.4443,.6991;-2.5552,3.9671,.4936;-3.7465,2.6916,-1.5239;-1.8923,2.2406,-3.3899;.5406,2.7411,-3.2054;2.0916,-5.8978,2.2202;1.6948,-6.3264,.1546;-4.1444,2.1725,-2.5428;-4.4403,2.9004,-.5482;6.7455,.1848,-1.8803;6.0539,1.4265,-1.7715;7.957,.1215,-2.6226;8.4516,1.231,-3.2621;8.4834,-.8359,-2.6853;9.3816,1.17,-3.834;6.5751,2.5483,-2.4756;7.741,2.4535,-3.197;6.0338,3.4959,-2.4466;8.1195,3.3296,-3.7312;4.5711,3.9324,-.2517;3.7267,5.0761,-.1411;5.8942,4.023,.2649;6.3652,5.195,.8065;6.5402,3.1433,.2352;7.3853,5.2384,1.1986;4.2478,6.2791,.4106;5.5402,6.3437,.8686;3.5918,7.1528,.4751;5.9291,7.2726,1.295;-2.4154,-3.7325,-2.9044;-2.6211,-4.7826,-2.6467;-3.2857,-3.3457,-3.4674;-1.5482,-3.7044,-3.5829;-1.6946,-1.4685,-1.9787;-2.4644,-.901,-2.5344;-1.4283,-.9004,-1.0748;-.798,-1.4976,-2.6193;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662222607156</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.018584366247 0.001529246032 0.040955663954 0.005337396493</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037823335 -0.010470687 0.000079813 0.000177587 0.000246251 0.000273223 0.000321600 0.000389214 0.000421198 0.000503815 0.000638754 0.000759632 0.000781980 0.000833634 0.000907536 0.001009717 0.001043441 0.001178127 0.001237415 0.001284546 0.001414315 0.001417545 0.001495687 0.001588153 0.001753812 0.001832625 0.001959723 0.002176882 0.002688943 0.003006237 0.003239365 0.003456809 0.003942067 0.004127362 0.004397111 0.004754576 0.004828430 0.005413891 0.005580252 0.005945586 0.006581242 0.006853523 0.007284575 0.007525959 0.007835838 0.008294746 0.008705644 0.009227307 0.009760316 0.010124583 0.010310003 0.012146129 0.012626968 0.012815914 0.013340780 0.014257093 0.014586641 0.014833782 0.015291814 0.015344908 0.015850950 0.016224145 0.016431048 0.017200284 0.017502760 0.018349377 0.019348070 0.020302249 0.021092932 0.022201951 0.023012607 0.023216983 0.024531214 0.025629476 0.025960815 0.026494691 0.026730629 0.027761971 0.029660658 0.030412753 0.031020160 0.031977533 0.032692079 0.034812573 0.036990933 0.037902418 0.038836996 0.039062121 0.040323062 0.040705923 0.041976017 0.045162752 0.045358315 0.046124975 0.049668986 0.050665876 0.051271851 0.051326136 0.051558277 0.051800029 0.052281431 0.052386754 0.052540975 0.052832738 0.053802103 0.054717045 0.056492795 0.056837645 0.056969616 0.057220938 0.057606010 0.058472928 0.059214871 0.059865943 0.060411563 0.060655712 0.061440267 0.061695856 0.064555458 0.064630471 0.065532468 0.067708078 0.068097265 0.069325831 0.071600309 0.072647522 0.076381336 0.076960142 0.080128159 0.081196756 0.082087719 0.086315778 0.089460356 0.090810023 0.092601578 0.092839773 0.094184578 0.095136729 0.095306180 0.095895147 0.096488144 0.096909477 0.098437681 0.099433583 0.099619833 0.101196249 0.101970610 0.102574332 0.103328988 0.103790301 0.104084590 0.106492808 0.107194966 0.108193790 0.108653270 0.110103750 0.112531537 0.113226554 0.115919455 0.116424912 0.117137780 0.119242461 0.122737079 0.125139559 0.126130419 0.127580278 0.128214522 0.128979817 0.133067367 0.135031797 0.136610097 0.137415945 0.141965346 0.144415127 0.145715226 0.146674012 0.149425108 0.152442690 0.153804767 0.157248157 0.159948732 0.169769555 0.173851528 0.174709326 0.180378427 0.183166297 0.185172435 0.186792410 0.188031057 0.190694459 0.201599739 0.202763136 0.203756308 0.204819741 0.206777634 0.207129257 0.208915847 0.209585411 0.212263190 0.215098626 0.216537359 0.224689917 0.231453647 0.232391905 0.232996703 0.234910544 0.244010883 0.248012488 0.254254278 0.254987591 0.256667905 0.258707188 0.271367435 0.276245151 0.289399567 0.295259965 0.297245552 0.299257040 0.303899865 0.305854345 0.307521319 0.311386775 0.320035843 0.321794507 0.324720677 0.327744843 0.345086997 0.347048122 0.349072675 0.350581916 0.354674878 0.358802589 0.363837151 0.368654397 0.380210284 0.383746434 0.404699703 0.425675712 0.430039241 0.444331115 0.462850023 0.462997585 0.474531565 0.475284043 0.477886984 0.480537820 0.498020191 0.506923012 0.541338793 0.562081551 0.566722265 0.571290619 0.583253218 0.604176623 0.621057844 0.637226790 0.643011681 0.665269772 0.670452633 0.680543173 0.681289525 0.689920983 0.691572304 0.704238656 0.704750406 0.706573972 0.713755857 0.737088474 0.750679070 0.771572442 0.775827573 0.797876206 0.809335977 0.815614325 0.818146438 0.819990387 0.820670761 0.823063087 0.829452891 0.830706844 0.840496909 0.844174805 0.845671774 0.848611106 0.856316210 0.859185649 0.867334331 0.871768747 0.874893251 0.883823053 0.886490399 0.887702497 0.893508850 0.911989933 0.915072046 0.923909151 0.930935628 0.933781960 0.958347066 0.969144015 0.975826408 0.989121147 0.999612289 1.012932468 1.034012427 1.042607412 1.049152243 1.055210157 1.072855518 1.084181948 1.088640848 1.109989874 1.110584633 1.116103986 1.122411389 1.123318238 1.134003562 1.142200871 1.161147338 1.168705583 1.172570770 1.173190056 1.200374392 1.203684853 1.214651305 1.247207334 1.270889442 1.292135603 1.295724995 1.314123720 1.326150732 1.326469699 1.330137145 1.334416621 1.339060039 1.340976207 1.345762908 1.362021352 1.377623101 1.378869508 1.380940227 1.381580593 1.557364974 1.666972442 1.671918283</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">36</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.99367038" y3="-0.9449664" z3="-0.60883401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.70835445" y3="-1.9345176" z3="-1.41744082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.18511323" y3="-0.98125941" z3="-1.29406546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.84468746" y3="1.48520659" z3="-1.00057428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.34892672" y3="0.31638431" z3="-0.44815048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71169836" y3="2.70567606" z3="-1.20667273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04550936" y3="2.73401361" z3="-0.83902154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36515248" y3="4.98269116" z3="-0.52472256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83575102" y3="3.814882" z3="-1.02106677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.71932037" y3="5.85594768" z3="-0.3899475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.18814055" y3="1.55678252" z3="-1.72194048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16535289" y3="0.35128695" z3="0.23130084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.77886737" y3="0.35087177" z3="-0.66959644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64322651" y3="0.71051857" z3="0.21579528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.76222009" y3="-0.90250169" z3="-1.51679289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0806032" y3="-2.46670019" z3="-1.34862653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82804007" y3="-5.3916485" z3="-6.3848352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59391928" y3="-4.97182122" z3="-5.4023692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97585275" y3="-3.86913587" z3="-2.9069182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57981727" y3="-3.59341954" z3="-5.23002555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.3295549" y3="-5.81488529" z3="-4.32049875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03479046" y3="-5.25760935" z3="-3.08198967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28032032" y3="-3.01146362" z3="-3.9886488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79476533" y3="-2.91371294" z3="-6.05829057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36605695" y3="-6.90115192" z3="-4.43536182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86364537" y3="-5.90343894" z3="-2.21652932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60606352" y3="-3.33852026" z3="-1.64473751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.39965241" y3="-3.81159782" z3="-0.89825273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.76918903" y3="-4.79915368" z3="-1.18783855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41050407" y3="-3.55040259" z3="0.55944718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45943103" y3="-3.15241109" z3="3.33135835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.77369055" y3="-4.59465524" z3="1.41905216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08484705" y3="-2.3018681" z3="1.0999982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10811774" y3="-2.10614889" z3="2.47718124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.79011392" y3="-4.39872494" z3="2.7984121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.00573414" y3="-5.58146784" z3="1.00794553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.16796062" y3="-1.45051821" z3="0.46581163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15839931" y3="-1.12128961" z3="2.87071317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.04178602" y3="-5.23215919" z3="3.45971428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46665819" y3="-3.00147053" z3="4.41478692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24456891" y3="-1.67531258" z3="-3.92790831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44669251" y3="-1.30152508" z3="-3.02407416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37718309" y3="3.63356991" z3="-1.23486346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15961894" y3="-2.8744318" z3="-1.68527747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94311303" y3="-3.10103256" z3="-0.54912454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08421939" y3="-2.28612906" z3="0.44420972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81280835" y3="-0.74809789" z3="0.81804932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.94222852" y3="-0.37722928" z3="-0.61843451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49529879" y3="0.51423993" z3="1.16636854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.76683194" y3="-1.12909322" z3="2.38405066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.47227893" y3="-4.3058803" z3="-0.39120135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.20961987" y3="-4.5909083" z3="0.78752042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.39730383" y3="-0.24908947" z3="-1.56427963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.48486072" y3="0.56768515" z3="-0.44059273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.68618217" y3="-1.1826432" z3="-0.75342886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.73313435" y3="0.65700904" z3="0.38941397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.96134416" y3="0.24985678" z3="2.11293283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00588956" y3="1.48203857" z3="1.33277494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.21700678" y3="-0.20755514" z3="2.79175885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.57964123" y3="-1.85619636" z3="2.21559693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.08966123" y3="-1.54098697" z3="3.15280821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.13226986" y3="-3.98804875" z3="0.82184595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.60522644" y3="-4.39770719" z3="1.68708861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.46711626" y3="-5.65634086" z3="0.72150625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33027609" y3="-2.18800704" z3="-0.13506841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14233707" y3="-3.24608608" z3="-1.03543323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45824156" y3="-4.39505936" z3="-0.65704595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97401556" y3="-4.48283006" z3="0.6429773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16849272" y3="-3.46470787" z3="1.57179059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.83848393" y3="-2.31489538" z3="1.17277098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49284413" y3="-3.14590472" z3="-2.06588189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27672497" y3="-5.20273324" z3="-1.36705018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.20186982" y3="-5.66197325" z3="1.03843968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76936662" y3="-3.57125451" z3="2.58139852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.96665623" y3="-1.49444513" z3="1.88091345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50666482" y3="3.99252649" z3="-0.20818048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86469966" y3="3.72010725" z3="-0.30444448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.33455196" y3="3.07658962" z3="-1.44412451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.49158676" y3="2.7442359" z3="-2.50154168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.13704708" y3="3.02905446" z3="-2.39187637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.11293341" y3="4.44277122" z3="0.70638787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55346735" y3="3.96944397" z3="0.50299553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.74895148" y3="2.70180527" z3="-1.51674212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.89795184" y3="2.2523259" z3="-3.38595193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.53609048" y3="2.74824539" z3="-3.20308599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.0949653" y3="-5.90111401" z3="2.22027385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.69656523" y3="-6.32976117" z3="0.15490946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.14962617" y3="2.18794366" z3="-2.53839041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44265098" y3="2.91046792" z3="-0.5413251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.74249845" y3="0.18387525" z3="-1.88212804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.05149689" y3="1.42587562" z3="-1.77301566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.95405517" y3="0.12016636" z3="-2.62435262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.44910374" y3="1.22960218" z3="-3.26357832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.47994967" y3="-0.83748774" z3="-2.68726928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.37910625" y3="1.1683372" z3="-3.83557292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57331901" y3="2.54766248" z3="-2.47679712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73916221" y3="2.4524565" z3="-3.19820404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03245672" y3="3.49551878" z3="-2.4474853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11798901" y3="3.32854449" z3="-3.73216277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5711708" y3="3.93162356" z3="-0.25105275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7277142" y3="5.07591071" z3="-0.13877429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89465108" y3="4.02074533" z3="0.26500111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.36684882" y3="5.19185743" z3="0.80744152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53988252" y3="3.14060364" z3="0.23419085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.38716327" y3="5.2341234" z3="1.19898701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.25001434" y3="6.27801706" z3="0.41376609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.54281384" y3="6.34118604" z3="0.87100174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.59478133" y3="7.15212259" z3="0.47949318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.93266549" y3="7.26937757" z3="1.29801476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41531627" y3="-3.74017051" z3="-2.90265981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.61746494" y3="-4.79032346" z3="-2.64161201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28741317" y3="-3.35771957" z3="-3.46605819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54879591" y3="-3.71109287" z3="-3.5818466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69729682" y3="-1.47273858" z3="-1.983275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46422705" y3="-0.90986751" z3="-2.54618602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.43830517" y3="-0.90004012" z3="-1.08090182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79700503" y3="-1.50207669" z3="-2.61822614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9937,-.945,-.6088;6.7084,-1.9345,-1.4174;6.1851,-.9813,-1.2941;4.8447,1.4852,-1.0006;4.3489,.3164,-.4482;2.7117,2.7057,-1.2067;4.0455,2.734,-.839;2.3652,4.9827,-.5247;1.8358,3.8149,-1.0211;1.7193,5.8559,-.3899;2.1881,1.5568,-1.7219;3.1654,.3513,.2313;1.7789,.3509,-.6696;.6432,.7105,.2158;1.7622,-.9025,-1.5168;1.0806,-2.4667,-1.3486;1.828,-5.3916,-6.3848;1.5939,-4.9718,-5.4024;.9759,-3.8691,-2.9069;1.5798,-3.5934,-5.23;1.3296,-5.8149,-4.3205;1.0348,-5.2576,-3.082;1.2803,-3.0115,-3.9886;1.7948,-2.9137,-6.0583;1.3661,-6.9012,-4.4354;.8636,-5.9034,-2.2165;.6061,-3.3385,-1.6447;-.3997,-3.8116,-.8983;-.7692,-4.7992,-1.1878;-.4105,-3.5504,.5594;-.4594,-3.1524,3.3314;-.7737,-4.5947,1.4191;-.0848,-2.3019,1.1;-.1081,-2.1061,2.4772;-.7901,-4.3987,2.7984;-1.0057,-5.5815,1.0079;.168,-1.4505,.4658;.1584,-1.1213,2.8707;-1.0418,-5.2322,3.4597;-.4667,-3.0015,4.4148;1.2446,-1.6753,-3.9279;1.4467,-1.3015,-3.0241;.3772,3.6336,-1.2349;-2.1596,-2.8744,-1.6853;-2.9431,-3.101,-.5491;-3.0842,-2.2861,.4442;-3.8128,-.7481,.818;-4.9422,-.3772,-.6184;-2.4953,.5142,1.1664;-4.7668,-1.1291,2.3841;-3.4723,-4.3059,-.3912;-4.2096,-4.5909,.7875;-4.3973,-.2491,-1.5643;-5.4849,.5677,-.4406;-5.6862,-1.1826,-.7534;-1.7331,.657,.3894;-1.9613,.2499,2.1129;-3.0059,1.482,1.3328;-5.217,-.2076,2.7918;-5.5796,-1.8562,2.2156;-4.0897,-1.541,3.1528;-5.1323,-3.988,.8218;-3.6052,-4.3977,1.6871;-4.4671,-5.6563,.7215;4.3303,-2.188,-.1351;4.1423,-3.2461,-1.0354;3.4582,-4.3951,-.657;2.974,-4.4828,.643;3.1685,-3.4647,1.5718;3.8385,-2.3149,1.1728;4.4928,-3.1459,-2.0659;3.2767,-5.2027,-1.3671;2.2019,-5.662,1.0384;2.7694,-3.5713,2.5814;3.9667,-1.4944,1.8809;-.5067,3.9925,-.2082;-1.8647,3.7201,-.3044;-2.3346,3.0766,-1.4441;-1.4916,2.7442,-2.5015;-.137,3.0291,-2.3919;-.1129,4.4428,.7064;-2.5535,3.9694,.503;-3.749,2.7018,-1.5167;-1.898,2.2523,-3.386;.5361,2.7482,-3.2031;2.095,-5.9011,2.2203;1.6966,-6.3298,.1549;-4.1496,2.1879,-2.5384;-4.4427,2.9105,-.5413;6.7425,.1839,-1.8821;6.0515,1.4259,-1.773;7.9541,.1202,-2.6244;8.4491,1.2296,-3.2636;8.4799,-.8375,-2.6873;9.3791,1.1683,-3.8356;6.5733,2.5477,-2.4768;7.7392,2.4525,-3.1982;6.0325,3.4955,-2.4475;8.118,3.3285,-3.7322;4.5712,3.9316,-.2511;3.7277,5.0759,-.1388;5.8947,4.0207,.265;6.3668,5.1919,.8074;6.5399,3.1406,.2342;7.3872,5.2341,1.199;4.25,6.278,.4138;5.5428,6.3412,.871;3.5948,7.1521,.4795;5.9327,7.2694,1.298;-2.4153,-3.7402,-2.9027;-2.6175,-4.7903,-2.6416;-3.2874,-3.3577,-3.4661;-1.5488,-3.7111,-3.5818;-1.6973,-1.4727,-1.9833;-2.4642,-.9099,-2.5462;-1.4383,-.9,-1.0809;-.797,-1.5021,-2.6182;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662230245818</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.021602272613 0.001591475096 0.032857735576 0.005337389666</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.037954403 -0.011461562 0.000084576 0.000177671 0.000246539 0.000273633 0.000323627 0.000389466 0.000421883 0.000504501 0.000638694 0.000759653 0.000782613 0.000833595 0.000907534 0.001012734 0.001043276 0.001178100 0.001237507 0.001286457 0.001414732 0.001417552 0.001495910 0.001596769 0.001755344 0.001833432 0.001962914 0.002176873 0.002699417 0.003006981 0.003245832 0.003458166 0.003945883 0.004153801 0.004424005 0.004773658 0.004828851 0.005435736 0.005583359 0.005945745 0.006585038 0.006861904 0.007288977 0.007551733 0.007837137 0.008294133 0.008705813 0.009234480 0.009760157 0.010130524 0.010312704 0.012490434 0.012720941 0.013260279 0.013777194 0.014262729 0.014592976 0.015151736 0.015294637 0.015714646 0.016145451 0.016326234 0.016538058 0.017347194 0.017505203 0.018408725 0.019576510 0.020316028 0.021112153 0.022203204 0.023014761 0.023228818 0.024533508 0.025635562 0.025961268 0.026495275 0.026730595 0.027762179 0.029665983 0.030412837 0.031032743 0.031981501 0.032691790 0.034804137 0.036993606 0.037928434 0.038860602 0.039108994 0.040325089 0.040716175 0.042067814 0.045223230 0.045607822 0.046125662 0.049669028 0.050666126 0.051325778 0.051549296 0.051627887 0.051801568 0.052281446 0.052386774 0.052541693 0.052811486 0.053806863 0.054717241 0.056492865 0.056838003 0.056972344 0.057220873 0.057608442 0.058476508 0.059215945 0.059897493 0.060423102 0.060729005 0.061440936 0.061698002 0.064555732 0.064636258 0.065533986 0.067709493 0.068104203 0.069331067 0.071603580 0.072647653 0.076384399 0.076967587 0.080129362 0.081202276 0.082088474 0.086325609 0.089461565 0.090809949 0.092608636 0.092839800 0.094185223 0.095138641 0.095306190 0.095902615 0.096488748 0.096909845 0.098441861 0.099433562 0.099657366 0.101196914 0.101978152 0.102577067 0.103385659 0.103790806 0.104132210 0.106498457 0.107203718 0.108194058 0.108657178 0.110109720 0.112532425 0.113233784 0.115920884 0.116425086 0.117140009 0.119252139 0.122770279 0.125423915 0.126229850 0.127599801 0.128213578 0.129745669 0.133068195 0.135109329 0.136675481 0.141897827 0.142091583 0.144431996 0.145716416 0.146683417 0.150877436 0.152481623 0.157230598 0.159274084 0.164696139 0.169820885 0.173860310 0.174753365 0.180385976 0.183166955 0.185185533 0.187512445 0.188032848 0.191913313 0.201653485 0.203164020 0.204341251 0.205719961 0.206791123 0.207132782 0.208937256 0.209620313 0.212275495 0.215101890 0.216564429 0.224690872 0.231454479 0.232393778 0.233000493 0.234911971 0.244012029 0.248012478 0.254255939 0.254987552 0.256668034 0.258707170 0.271367440 0.276250370 0.289402358 0.295261961 0.297274861 0.299258664 0.303899398 0.305856343 0.307521411 0.311392230 0.320043296 0.321799990 0.324720920 0.327746170 0.345084121 0.347100717 0.349232968 0.350586321 0.354674961 0.358803055 0.363839277 0.368910187 0.380301630 0.384849803 0.404701426 0.425692362 0.430039200 0.444332273 0.462856015 0.463003800 0.474561640 0.475307119 0.477886984 0.480554682 0.498020325 0.506949824 0.541356398 0.562131272 0.566723102 0.571350633 0.583253279 0.604178801 0.621075231 0.637399731 0.643024160 0.665271781 0.670481918 0.680859680 0.681289525 0.689919489 0.691573034 0.704239137 0.704754232 0.707289898 0.713756681 0.737092847 0.750679084 0.771572443 0.775827884 0.797880295 0.809801686 0.815625498 0.818300701 0.819998754 0.821000739 0.823351301 0.829452866 0.830711388 0.840500791 0.844319325 0.846029457 0.848611018 0.856350997 0.859207074 0.867334790 0.871798214 0.874907571 0.886486636 0.887699915 0.893478503 0.901695720 0.914974956 0.923892767 0.929755476 0.931017177 0.933814517 0.958347119 0.969144944 0.975826423 0.989121698 0.999612294 1.012932694 1.034012484 1.042607813 1.049152238 1.055210158 1.072856080 1.084181948 1.088640863 1.109989876 1.110584634 1.116104732 1.122411394 1.123318233 1.134004767 1.142204127 1.161147410 1.168705759 1.172571101 1.173190172 1.200374435 1.203686071 1.214651358 1.247208527 1.270984938 1.292135408 1.295724929 1.314123841 1.326150660 1.326469602 1.330137111 1.334416611 1.339112710 1.340976339 1.345763020 1.362021497 1.377624874 1.378869473 1.380940258 1.381580632 1.557365046 1.667059287 1.671918753</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">37</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.99003245" y3="-0.94536263" z3="-0.61071263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.7045313" y3="-1.93542462" z3="-1.41913043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.18153988" y3="-0.98201204" z3="-1.29587002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.84230245" y3="1.48496957" z3="-1.00202592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.34585172" y3="0.3162649" z3="-0.44997596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.71017156" y3="2.70740067" z3="-1.20627727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04419681" y3="2.7343039" z3="-0.83934887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3656203" y3="4.98376361" z3="-0.52122113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83506474" y3="3.81683234" z3="-1.01836926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72040586" y3="5.85722014" z3="-0.38481279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.18546975" y3="1.55953176" z3="-1.72276999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16215976" y3="0.35177701" z3="0.22942566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.77600644" y3="0.35269269" z3="-0.67174789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6401284" y3="0.71224709" z3="0.21375485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.75880516" y3="-0.89995354" z3="-1.51968081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08050743" y3="-2.46662483" z3="-1.35020526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82918699" y3="-5.39599767" z3="-6.38360222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59500972" y3="-4.97542393" z3="-5.40146826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97676449" y3="-3.87069572" z3="-2.90671685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58055205" y3="-3.59687632" z3="-5.23023229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33085784" y3="-5.81757693" z3="-4.31886333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03610222" y3="-5.25929979" z3="-3.08078537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28087248" y3="-3.01398999" z3="-3.98936919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79522712" y3="-2.91780506" z3="-6.05909712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36755495" y3="-6.9039409" z3="-4.43278457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.8651629" y3="-5.90445331" z3="-2.21478052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60703134" y3="-3.3391834" z3="-1.64508025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.40057178" y3="-3.81029841" z3="-0.89877268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.76643194" y3="-4.80059618" z3="-1.18477914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40865211" y3="-3.54802265" z3="0.55947983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45349446" y3="-3.14472069" z3="3.33092901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.76644628" y3="-4.59187712" z3="1.42198003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0858222" y3="-2.29769351" z3="1.09718646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10695402" y3="-2.09912834" z3="2.47402714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.78101075" y3="-4.39319111" z3="2.80108206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.99570591" y3="-5.58044961" z3="1.01346343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.16320272" y3="-1.44692897" z3="0.46069854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15698867" y3="-1.11252055" z3="2.8648197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.02867089" y3="-5.22618101" z3="3.46456775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45941213" y3="-2.99158145" z3="4.41408857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24460109" y3="-1.67768055" z3="-3.93001658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44568601" y3="-1.30264165" z3="-3.02657852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37613851" y3="3.63666083" z3="-1.23051254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15630892" y3="-2.88118733" z3="-1.68410365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94155656" y3="-3.1054017" z3="-0.54755442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0850006" y3="-2.28877298" z3="0.44357755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81534869" y3="-0.74925145" z3="0.81399815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.93504619" y3="-0.37296659" z3="-0.62845666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50114552" y3="0.51044664" z3="1.18161819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.77787069" y3="-1.12812162" z3="2.37187841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46820462" y3="-4.30974281" z3="-0.38788515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.20331645" y3="-4.59487535" z3="0.79283622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.37839252" y3="-0.24159821" z3="-1.57224016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.47926374" y3="0.57012715" z3="-0.44885198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.6758724" y3="-1.17992783" z3="-0.77220497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.7209096" y3="0.64989125" z3="0.40926338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.96707055" y3="0.2510679" z3="2.0985182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00097511" y3="1.48226787" z3="1.33690978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.22965438" y3="-0.20379582" z3="2.77634346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.5928648" y3="-1.85214703" z3="2.19620523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.10632777" y3="-1.54150798" z3="3.14532644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12696048" y3="-3.99356314" z3="0.82713321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.59754823" y3="-4.39858422" z3="1.69116267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.45875315" y3="-5.66115017" z3="0.7293568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.32684107" y3="-2.18839457" z3="-0.1366383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14090536" y3="-3.24752034" z3="-1.03622118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4584651" y3="-4.39725535" z3="-0.65718036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9737736" y3="-4.48469534" z3="0.64267334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16583329" y3="-3.46532742" z3="1.57061173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.83422708" y3="-2.31479074" z3="1.17095703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4919009" y3="-3.14778125" z3="-2.06654812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.27873023" y3="-5.20590521" z3="-1.36651803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2036515" y3="-5.66490175" z3="1.03878606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76614257" y3="-3.57150688" z3="2.58004701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.96065799" y3="-1.49351614" z3="1.87845571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50595808" y3="3.9939447" z3="-0.20175304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86430239" y3="3.7228664" z3="-0.29672658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.33647451" y3="3.08293725" z3="-1.43756173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.49523056" y3="2.75245843" z3="-2.49693228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.14011995" y3="3.03510372" z3="-2.38808828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.11064177" y3="4.44180126" z3="0.71324253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55182531" y3="3.97160436" z3="0.5118932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.75241492" y3="2.71314378" z3="-1.51076047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.90341397" y3="2.26370593" z3="-3.38219799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.53184381" y3="2.7552854" z3="-3.20063636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.09812244" y3="-5.90422148" z3="2.22069272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.69846616" y3="-6.33333366" z3="0.15569318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.16152029" y3="2.2208014" z3="-2.54588377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.43883199" y3="2.90506047" z3="-0.52132509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.73942463" y3="0.18290552" z3="-1.88385254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04903491" y3="1.42521002" z3="-1.77452998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.95097815" y3="0.11875228" z3="-2.62604454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.44656506" y3="1.22807751" z3="-3.26504011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.47641885" y3="-0.83913973" z3="-2.68911135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.3765515" y3="1.16647633" z3="-3.83702331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.57141009" y3="2.5469017" z3="-2.47803643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73722" y3="2.45127087" z3="-3.19943734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.03100725" y3="3.49501597" z3="-2.4484808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11649622" y3="3.32728118" z3="-3.73320084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57110816" y3="3.93090195" z3="-0.25042626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72859088" y3="5.07570899" z3="-0.13645207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89493996" y3="4.0184953" z3="0.2649847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.36838186" y3="5.18874014" z3="0.80820219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53943556" y3="3.13786143" z3="0.23310352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.38894428" y3="5.22981959" z3="1.19922423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.25217776" y3="6.27692416" z3="0.41678995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.54531995" y3="6.33867859" z3="0.87324212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.59765906" y3="7.15147035" z3="0.48371601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.9361736" y3="7.26618366" z3="1.30082236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41385497" y3="-3.7484347" z3="-2.90033088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.61320216" y3="-4.79845436" z3="-2.63752828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28797288" y3="-3.3689095" z3="-3.46243551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54886601" y3="-3.71852713" z3="-3.5815883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69935145" y3="-1.47795726" z3="-1.98718572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.465389" y3="-0.92202113" z3="-2.55968553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.44873819" y3="-0.89779089" z3="-1.08629279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7947968" y3="-1.50707591" z3="-2.61626881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.99,-.9454,-.6107;6.7045,-1.9354,-1.4191;6.1815,-.982,-1.2959;4.8423,1.485,-1.002;4.3459,.3163,-.45;2.7102,2.7074,-1.2063;4.0442,2.7343,-.8393;2.3656,4.9838,-.5212;1.8351,3.8168,-1.0184;1.7204,5.8572,-.3848;2.1855,1.5595,-1.7228;3.1622,.3518,.2294;1.776,.3527,-.6717;.6401,.7122,.2138;1.7588,-.9,-1.5197;1.0805,-2.4666,-1.3502;1.8292,-5.396,-6.3836;1.595,-4.9754,-5.4015;.9768,-3.8707,-2.9067;1.5806,-3.5969,-5.2302;1.3309,-5.8176,-4.3189;1.0361,-5.2593,-3.0808;1.2809,-3.014,-3.9894;1.7952,-2.9178,-6.0591;1.3676,-6.9039,-4.4328;.8652,-5.9045,-2.2148;.607,-3.3392,-1.6451;-.4006,-3.8103,-.8988;-.7664,-4.8006,-1.1848;-.4087,-3.548,.5595;-.4535,-3.1447,3.3309;-.7664,-4.5919,1.422;-.0858,-2.2977,1.0972;-.107,-2.0991,2.474;-.781,-4.3932,2.8011;-.9957,-5.5804,1.0135;.1632,-1.4469,.4607;.157,-1.1125,2.8648;-1.0287,-5.2262,3.4646;-.4594,-2.9916,4.4141;1.2446,-1.6777,-3.93;1.4457,-1.3026,-3.0266;.3761,3.6367,-1.2305;-2.1563,-2.8812,-1.6841;-2.9416,-3.1054,-.5476;-3.085,-2.2888,.4436;-3.8153,-.7493,.814;-4.935,-.373,-.6285;-2.5011,.5104,1.1816;-4.7779,-1.1281,2.3719;-3.4682,-4.3097,-.3879;-4.2033,-4.5949,.7928;-4.3784,-.2416,-1.5722;-5.4793,.5701,-.4489;-5.6759,-1.1799,-.7722;-1.7209,.6499,.4093;-1.9671,.2511,2.0985;-3.001,1.4823,1.3369;-5.2297,-.2038,2.7763;-5.5929,-1.8521,2.1962;-4.1063,-1.5415,3.1453;-5.127,-3.9936,.8271;-3.5975,-4.3986,1.6912;-4.4588,-5.6612,.7294;4.3268,-2.1884,-.1366;4.1409,-3.2475,-1.0362;3.4585,-4.3973,-.6572;2.9738,-4.4847,.6427;3.1658,-3.4653,1.5706;3.8342,-2.3148,1.171;4.4919,-3.1478,-2.0665;3.2787,-5.2059,-1.3665;2.2037,-5.6649,1.0388;2.7661,-3.5715,2.58;3.9607,-1.4935,1.8785;-.506,3.9939,-.2018;-1.8643,3.7229,-.2967;-2.3365,3.0829,-1.4376;-1.4952,2.7525,-2.4969;-.1401,3.0351,-2.3881;-.1106,4.4418,.7132;-2.5518,3.9716,.5119;-3.7524,2.7131,-1.5108;-1.9034,2.2637,-3.3822;.5318,2.7553,-3.2006;2.0981,-5.9042,2.2207;1.6985,-6.3333,.1557;-4.1615,2.2208,-2.5459;-4.4388,2.9051,-.5213;6.7394,.1829,-1.8839;6.049,1.4252,-1.7745;7.951,.1188,-2.626;8.4466,1.2281,-3.265;8.4764,-.8391,-2.6891;9.3766,1.1665,-3.837;6.5714,2.5469,-2.478;7.7372,2.4513,-3.1994;6.031,3.495,-2.4485;8.1165,3.3273,-3.7332;4.5711,3.9309,-.2504;3.7286,5.0757,-.1365;5.8949,4.0185,.265;6.3684,5.1887,.8082;6.5394,3.1379,.2331;7.3889,5.2298,1.1992;4.2522,6.2769,.4168;5.5453,6.3387,.8732;3.5977,7.1515,.4837;5.9362,7.2662,1.3008;-2.4139,-3.7484,-2.9003;-2.6132,-4.7985,-2.6375;-3.288,-3.3689,-3.4624;-1.5489,-3.7185,-3.5816;-1.6994,-1.478,-1.9872;-2.4654,-.922,-2.5597;-1.4487,-.8978,-1.0863;-.7948,-1.5071,-2.6163;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662303841716</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.018724251317 0.001558692913 0.029054759835 0.005337512095</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.038253415 -0.008795031 0.000084423 0.000178288 0.000247004 0.000273755 0.000325281 0.000389478 0.000422080 0.000504501 0.000639076 0.000759955 0.000782552 0.000833745 0.000907669 0.001013421 0.001043084 0.001178648 0.001237539 0.001286533 0.001415363 0.001417522 0.001498533 0.001597548 0.001755263 0.001835706 0.001963923 0.002177059 0.002704862 0.003006982 0.003248533 0.003458200 0.003947405 0.004176124 0.004458352 0.004781850 0.004831494 0.005447696 0.005584119 0.005946483 0.006589087 0.006866154 0.007289655 0.007627716 0.007859440 0.008321402 0.008706285 0.009237375 0.009765021 0.010133964 0.010314944 0.012506808 0.012739517 0.013313348 0.014227908 0.014520350 0.014592859 0.015283087 0.015397050 0.015793138 0.016159756 0.016388099 0.017042172 0.017479993 0.018125941 0.019086070 0.020247005 0.021043456 0.021693433 0.022205108 0.023035548 0.023368852 0.024553368 0.025637443 0.025966190 0.026496837 0.026730915 0.027762170 0.029702052 0.030414414 0.031123308 0.031981525 0.032695071 0.034941544 0.037043657 0.038050512 0.038862684 0.039170433 0.040324920 0.040715505 0.042069721 0.045221257 0.045591257 0.046126570 0.049669077 0.050666108 0.051325699 0.051554586 0.051797635 0.051910981 0.052281469 0.052386896 0.052544638 0.053087043 0.053815766 0.054717455 0.056492858 0.056838725 0.056976948 0.057223756 0.057609471 0.058476921 0.059215881 0.059895066 0.060423616 0.060726717 0.061440815 0.061698142 0.064556373 0.064641191 0.065533819 0.067710787 0.068103339 0.069330436 0.071613750 0.072647901 0.076390594 0.077000432 0.080128863 0.081204271 0.082091293 0.086348795 0.089462576 0.090810196 0.092628257 0.092839976 0.094186004 0.095144922 0.095306503 0.095918063 0.096488875 0.096913178 0.098443392 0.099433634 0.099670772 0.101199108 0.101992626 0.102580166 0.103446138 0.103790624 0.104134662 0.106515897 0.107216146 0.108195807 0.108658948 0.110113839 0.112533919 0.113234439 0.115921604 0.116425071 0.117145057 0.119254334 0.122802815 0.125487722 0.126231774 0.127615639 0.128223320 0.129886648 0.133068327 0.135113751 0.136676231 0.141958874 0.142693641 0.144448768 0.145715922 0.146687837 0.151144060 0.152489736 0.157237758 0.159522843 0.169633041 0.170846021 0.173914722 0.174787345 0.180387712 0.183166947 0.185204701 0.187942288 0.188064957 0.193334739 0.201684355 0.203358562 0.204497229 0.206746375 0.207124381 0.208387934 0.209059075 0.209712633 0.212292724 0.215103870 0.216651212 0.224690779 0.231454478 0.232394063 0.233000307 0.234912121 0.244014034 0.248013120 0.254255898 0.254987809 0.256668243 0.258712666 0.271367430 0.276251177 0.289402718 0.295264215 0.297272761 0.299280824 0.303925683 0.305856607 0.307521443 0.311393282 0.320048960 0.321800757 0.324721147 0.327758577 0.345177034 0.347100907 0.349252662 0.350592977 0.354680940 0.358803608 0.363844379 0.368900520 0.380572058 0.386045646 0.404788518 0.425740280 0.430044240 0.444332368 0.462921829 0.463041792 0.474833221 0.475307223 0.477887058 0.480883165 0.498020783 0.507332872 0.541507399 0.562695199 0.566729928 0.572169276 0.583253393 0.604193064 0.621395965 0.637448269 0.643093748 0.665278356 0.670636815 0.681009613 0.681289563 0.689922060 0.691573005 0.704239792 0.704764852 0.708711079 0.713800658 0.737118107 0.750679177 0.771572460 0.775829532 0.797880111 0.810047724 0.815638815 0.818460150 0.820015137 0.821289707 0.823453592 0.829454584 0.830761545 0.840503699 0.844328640 0.846023750 0.848617683 0.856367658 0.859219683 0.867335561 0.871836887 0.874914138 0.886486636 0.887700477 0.893478183 0.904705279 0.914984555 0.923905492 0.930924518 0.933767939 0.951283169 0.958347789 0.969145051 0.975827695 0.989122425 0.999612291 1.012932762 1.034013088 1.042607959 1.049152479 1.055210335 1.072856871 1.084182113 1.088641032 1.109989911 1.110584645 1.116105019 1.122411424 1.123318229 1.134005233 1.142204205 1.161147424 1.168705756 1.172571103 1.173190186 1.200374578 1.203686614 1.214657362 1.247234213 1.278722758 1.292222032 1.295745066 1.314155645 1.326159421 1.326483810 1.330137265 1.334417587 1.340857257 1.342375825 1.345765251 1.362021645 1.377694113 1.378874011 1.380940693 1.381585566 1.557367340 1.667402767 1.671925396</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">38</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.98639332" y3="-0.94584358" z3="-0.6128854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.70060019" y3="-1.93637951" z3="-1.42137894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1778691" y3="-0.98283099" z3="-1.29810809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83985963" y3="1.48467419" z3="-1.0035599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.34279199" y3="0.3160327" z3="-0.4519001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70850642" y3="2.70896128" z3="-1.20561581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0428001" y3="2.73449824" z3="-0.83955614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36600922" y3="4.98461058" z3="-0.51712817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83420042" y3="3.81858215" z3="-1.0151045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72141513" y3="5.8582531" z3="-0.37887499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.18282121" y3="1.56211226" z3="-1.72357844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15916995" y3="0.35193893" z3="0.22747985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.77301096" y3="0.35438352" z3="-0.67380079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63758632" y3="0.7138687" z3="0.21207865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.75549334" y3="-0.89789" z3="-1.52254825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08138146" y3="-2.46629546" z3="-1.35147537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82998915" y3="-5.39994219" z3="-6.38255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59585142" y3="-4.97864616" z3="-5.40070981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97775494" y3="-3.87218866" z3="-2.90700079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58088162" y3="-3.60001369" z3="-5.23065977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33225945" y3="-5.82008765" z3="-4.3173661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.03750323" y3="-5.26093459" z3="-3.07974235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28129834" y3="-3.01607899" z3="-3.99018367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79516496" y3="-2.92154966" z3="-6.06010133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.36931385" y3="-6.90651519" z3="-4.43044603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.86710034" y3="-5.9055455" z3="-2.21323579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60810238" y3="-3.33946072" z3="-1.64560256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.39460624" y3="-3.81363046" z3="-0.89591989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.76296376" y3="-4.80235379" z3="-1.18229911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40478798" y3="-3.54659765" z3="0.56044851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44712215" y3="-3.13731164" z3="3.33050513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.75892798" y3="-4.58945521" z3="1.42515931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08579558" y3="-2.29368463" z3="1.09467854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1054501" y3="-2.09222993" z3="2.47098413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77189223" y3="-4.38781563" z3="2.80378785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.98595367" y3="-5.57933701" z3="1.01883612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15903653" y3="-1.44353071" z3="0.45561593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15592522" y3="-1.10385879" z3="2.85914243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.01600748" y3="-5.22010836" z3="3.46928403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45174132" y3="-2.98199053" z3="4.41333436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24474301" y3="-1.67993168" z3="-3.9321027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44449481" y3="-1.30336902" z3="-3.02894473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37479971" y3="3.63985307" z3="-1.22557768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16060818" y3="-2.88292307" z3="-1.68546526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.94070894" y3="-3.10802481" z3="-0.54661632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0844152" y3="-2.29122937" z3="0.44517042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81348799" y3="-0.74953557" z3="0.80973709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.92462705" y3="-0.36953404" z3="-0.63842551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49775765" y3="0.50702712" z3="1.17875031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.78862188" y3="-1.12654372" z3="2.36120946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46436165" y3="-4.3141667" z3="-0.38388275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.19685759" y3="-4.59879141" z3="0.7980382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.35845513" y3="-0.23456619" z3="-1.57703001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.47409533" y3="0.57421649" z3="-0.46261923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.66606158" y3="-1.17512806" z3="-0.79231743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.70949178" y3="0.63839588" z3="0.41881901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.98405685" y3="0.24967812" z3="2.12757296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00187994" y3="1.48294663" z3="1.32187841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.2406413" y3="-0.20174454" z3="2.76319434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.60491628" y3="-1.84753288" z3="2.1780537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.12435853" y3="-1.54358062" z3="3.1394431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12204757" y3="-3.99962845" z3="0.83305136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.59033848" y3="-4.40003614" z3="1.69510842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.45010154" y3="-5.66566318" z3="0.73658452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.32341861" y3="-2.1888774" z3="-0.13851816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13956918" y3="-3.2490883" z3="-1.03729283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45890638" y3="-4.39965186" z3="-0.65758591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97365754" y3="-4.48678293" z3="0.64209217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16321055" y3="-3.46613492" z3="1.56912666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82991882" y3="-2.31484118" z3="1.16881721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49112414" y3="-3.14980383" z3="-2.06747237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.28114255" y3="-5.20936236" z3="-1.36621628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.20572342" y3="-5.66814781" z3="1.03887764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76293798" y3="-3.57195613" z3="2.57838199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.954468" y3="-1.49272401" z3="1.87565177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50549923" y3="3.99552349" z3="-0.19475259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86458638" y3="3.72745235" z3="-0.28927917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.33944848" y3="3.09288058" z3="-1.4321532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.49947749" y3="2.76220432" z3="-2.49242636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.14363257" y3="3.04159202" z3="-2.38393324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.10837993" y3="4.44031832" z3="0.72099192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.55071536" y3="3.97462074" z3="0.52114329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.75596864" y3="2.72572898" z3="-1.50478722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.90927174" y3="2.27599475" z3="-3.37832606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.52725956" y3="2.76221919" z3="-3.19750326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.10140175" y3="-5.90754849" z3="2.22081107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.70086438" y3="-6.33740116" z3="0.15617421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.15932613" y3="2.2229373" z3="-2.52540728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44592911" y3="2.92553085" z3="-0.52654288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.73619497" y3="0.1819243" z3="-1.88594904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.0464236" y3="1.42453117" z3="-1.77625514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.94769105" y3="0.1173703" z3="-2.62819377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.44378316" y3="1.22663054" z3="-3.26689952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.47267665" y3="-0.84075511" z3="-2.69150227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.37373027" y3="1.16473783" z3="-3.83891062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56930503" y3="2.54617464" z3="-2.47945899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73503442" y3="2.45015918" z3="-3.20093412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02937337" y3="3.49455213" z3="-2.44955591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11474432" y3="3.32612802" z3="-3.73445599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57102967" y3="3.93002726" z3="-0.24961533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.72944449" y3="5.07531978" z3="-0.13371279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.8952808" y3="4.01605506" z3="0.26498216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37003913" y3="5.18538606" z3="0.80901818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53903074" y3="3.13492394" z3="0.23184927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.3908982" y3="5.22524299" z3="1.1993911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.25439524" y3="6.27561261" z3="0.42025433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.54795184" y3="6.33592833" z3="0.87573434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.60060899" y3="7.15060752" z3="0.48853469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.93987601" y3="7.26272328" z3="1.30387528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41369166" y3="-3.75586862" z3="-2.89849682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.60932366" y3="-4.80605241" z3="-2.63301758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.289142" y3="-3.38078543" z3="-3.46152966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54900035" y3="-3.72496839" z3="-3.5799586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70272498" y3="-1.48182079" z3="-1.99174254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46559954" y3="-0.93108791" z3="-2.57292507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46047422" y3="-0.89673309" z3="-1.09198204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79324884" y3="-1.51197585" z3="-2.61408644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9864,-.9458,-.6129;6.7006,-1.9364,-1.4214;6.1779,-.9828,-1.2981;4.8399,1.4847,-1.0036;4.3428,.316,-.4519;2.7085,2.709,-1.2056;4.0428,2.7345,-.8396;2.366,4.9846,-.5171;1.8342,3.8186,-1.0151;1.7214,5.8583,-.3789;2.1828,1.5621,-1.7236;3.1592,.3519,.2275;1.773,.3544,-.6738;.6376,.7139,.2121;1.7555,-.8979,-1.5225;1.0814,-2.4663,-1.3515;1.83,-5.3999,-6.3826;1.5959,-4.9786,-5.4007;.9778,-3.8722,-2.907;1.5809,-3.6,-5.2307;1.3323,-5.8201,-4.3174;1.0375,-5.2609,-3.0797;1.2813,-3.0161,-3.9902;1.7952,-2.9215,-6.0601;1.3693,-6.9065,-4.4304;.8671,-5.9055,-2.2132;.6081,-3.3395,-1.6456;-.3946,-3.8136,-.8959;-.763,-4.8024,-1.1823;-.4048,-3.5466,.5604;-.4471,-3.1373,3.3305;-.7589,-4.5895,1.4252;-.0858,-2.2937,1.0947;-.1055,-2.0922,2.471;-.7719,-4.3878,2.8038;-.986,-5.5793,1.0188;.159,-1.4435,.4556;.1559,-1.1039,2.8591;-1.016,-5.2201,3.4693;-.4517,-2.982,4.4133;1.2447,-1.6799,-3.9321;1.4445,-1.3034,-3.0289;.3748,3.6399,-1.2256;-2.1606,-2.8829,-1.6855;-2.9407,-3.108,-.5466;-3.0844,-2.2912,.4452;-3.8135,-.7495,.8097;-4.9246,-.3695,-.6384;-2.4978,.507,1.1788;-4.7886,-1.1265,2.3612;-3.4644,-4.3142,-.3839;-4.1969,-4.5988,.798;-4.3585,-.2346,-1.577;-5.4741,.5742,-.4626;-5.6661,-1.1751,-.7923;-1.7095,.6384,.4188;-1.9841,.2497,2.1276;-3.0019,1.4829,1.3219;-5.2406,-.2017,2.7632;-5.6049,-1.8475,2.1781;-4.1244,-1.5436,3.1394;-5.122,-3.9996,.8331;-3.5903,-4.4,1.6951;-4.4501,-5.6657,.7366;4.3234,-2.1889,-.1385;4.1396,-3.2491,-1.0373;3.4589,-4.3997,-.6576;2.9737,-4.4868,.6421;3.1632,-3.4661,1.5691;3.8299,-2.3148,1.1688;4.4911,-3.1498,-2.0675;3.2811,-5.2094,-1.3662;2.2057,-5.6681,1.0389;2.7629,-3.572,2.5784;3.9545,-1.4927,1.8757;-.5055,3.9955,-.1948;-1.8646,3.7275,-.2893;-2.3394,3.0929,-1.4322;-1.4995,2.7622,-2.4924;-.1436,3.0416,-2.3839;-.1084,4.4403,.721;-2.5507,3.9746,.5211;-3.756,2.7257,-1.5048;-1.9093,2.276,-3.3783;.5273,2.7622,-3.1975;2.1014,-5.9075,2.2208;1.7009,-6.3374,.1562;-4.1593,2.2229,-2.5254;-4.4459,2.9255,-.5265;6.7362,.1819,-1.8859;6.0464,1.4245,-1.7763;7.9477,.1174,-2.6282;8.4438,1.2266,-3.2669;8.4727,-.8408,-2.6915;9.3737,1.1647,-3.8389;6.5693,2.5462,-2.4795;7.735,2.4502,-3.2009;6.0294,3.4946,-2.4496;8.1147,3.3261,-3.7345;4.571,3.93,-.2496;3.7294,5.0753,-.1337;5.8953,4.0161,.265;6.37,5.1854,.809;6.539,3.1349,.2318;7.3909,5.2252,1.1994;4.2544,6.2756,.4203;5.548,6.3359,.8757;3.6006,7.1506,.4885;5.9399,7.2627,1.3039;-2.4137,-3.7559,-2.8985;-2.6093,-4.8061,-2.633;-3.2891,-3.3808,-3.4615;-1.549,-3.725,-3.58;-1.7027,-1.4818,-1.9917;-2.4656,-.9311,-2.5729;-1.4605,-.8967,-1.092;-.7932,-1.512,-2.6141;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662400709069</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.012387629337 0.001304053825 0.036973649621 0.005338158086</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.038576302 -0.005677758 0.000084406 0.000178335 0.000247288 0.000273897 0.000326604 0.000390672 0.000422353 0.000505247 0.000639197 0.000760460 0.000782897 0.000834241 0.000908526 0.001013387 0.001043615 0.001178520 0.001238035 0.001286609 0.001417103 0.001418014 0.001500620 0.001597518 0.001755226 0.001836271 0.001969495 0.002177961 0.002715003 0.003008670 0.003248481 0.003458836 0.003947855 0.004180888 0.004483069 0.004781802 0.004839105 0.005448765 0.005585184 0.005951319 0.006590098 0.006866823 0.007289785 0.007660324 0.007876906 0.008333416 0.008709141 0.009237425 0.009767932 0.010135681 0.010319091 0.012507720 0.012744538 0.013323055 0.014232539 0.014591641 0.014714061 0.015286959 0.015638155 0.015874368 0.016210607 0.016387802 0.017081543 0.017487683 0.018181383 0.019345889 0.020267987 0.021097303 0.022202727 0.022874238 0.023096247 0.024423151 0.025359573 0.025671846 0.026020017 0.026502461 0.026736160 0.027762453 0.029785974 0.030418706 0.031371824 0.031981593 0.032709346 0.035247207 0.037102698 0.038326893 0.038865053 0.039256828 0.040325813 0.040738358 0.042079768 0.045236619 0.045706317 0.046128544 0.049669100 0.050666158 0.051327565 0.051554799 0.051797630 0.051892201 0.052281471 0.052386990 0.052544450 0.053312561 0.053824572 0.054717914 0.056493003 0.056839432 0.056978752 0.057236284 0.057609723 0.058479081 0.059216361 0.059919472 0.060426390 0.060782848 0.061441422 0.061699166 0.064556630 0.064643856 0.065535450 0.067711176 0.068111034 0.069351812 0.071634557 0.072648347 0.076401039 0.077074211 0.080146057 0.081206397 0.082098854 0.086393464 0.089463569 0.090811098 0.092669148 0.092840516 0.094186787 0.095158778 0.095309122 0.095943843 0.096489260 0.096926298 0.098443240 0.099433875 0.099670980 0.101200502 0.102016534 0.102579842 0.103451819 0.103792092 0.104148515 0.106538490 0.107248045 0.108199850 0.108660315 0.110117470 0.112534588 0.113234533 0.115923828 0.116425883 0.117159487 0.119261321 0.122846707 0.125572072 0.126247517 0.127617658 0.128258057 0.129909934 0.133068362 0.135114789 0.136676180 0.141967771 0.142846302 0.144465510 0.145716740 0.146692813 0.151130103 0.152489794 0.157240418 0.159533590 0.169744026 0.171264771 0.173972864 0.174782856 0.180387679 0.183168635 0.185217305 0.187982530 0.188152669 0.193621901 0.201700031 0.203480160 0.204542683 0.206752998 0.207128465 0.208894734 0.209564340 0.210447617 0.212300638 0.215103667 0.216689688 0.224693806 0.231455397 0.232404136 0.233004321 0.234912689 0.244029777 0.248013062 0.254261084 0.254989800 0.256668235 0.258725149 0.271367417 0.276277037 0.289405266 0.295286291 0.297301518 0.299307462 0.303975321 0.305858015 0.307521899 0.311402407 0.320048766 0.321804680 0.324721276 0.327817869 0.345384823 0.347363688 0.349256176 0.350621607 0.354691657 0.358804009 0.363847180 0.368958985 0.380786342 0.386195219 0.404911933 0.425739998 0.430050067 0.444335232 0.462966214 0.463094397 0.475072563 0.475329107 0.477887116 0.481376977 0.498021252 0.507813535 0.541669508 0.563303510 0.566738497 0.573375694 0.583253521 0.604211817 0.621880135 0.637959845 0.643189794 0.665284316 0.670834152 0.681091713 0.681289616 0.689925099 0.691574701 0.704239994 0.704778643 0.709349717 0.713908383 0.737151166 0.750679272 0.771572530 0.775831590 0.797891062 0.810099097 0.815638497 0.818471019 0.820063962 0.821354807 0.823780921 0.829470625 0.830816847 0.840504843 0.844334708 0.846226866 0.848632214 0.856367953 0.859223609 0.867336186 0.871886020 0.874925758 0.886490038 0.887700641 0.893489577 0.904970308 0.914985326 0.923907322 0.930925313 0.933774064 0.955984945 0.958352397 0.969145862 0.975831466 0.989123260 0.999612293 1.012934230 1.034014214 1.042607982 1.049152899 1.055210944 1.072874049 1.084182283 1.088641420 1.109989982 1.110584666 1.116105030 1.122411493 1.123318225 1.134005369 1.142204242 1.161147508 1.168705907 1.172571219 1.173190469 1.200375135 1.203692399 1.214659934 1.247248946 1.288720827 1.293143556 1.295893473 1.314230739 1.326178606 1.326516691 1.330137296 1.334418756 1.340908921 1.345756786 1.349185420 1.362022249 1.378073488 1.378920217 1.380943241 1.381613256 1.557370052 1.669446548 1.671984039</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">39</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.98287815" y3="-0.94631653" z3="-0.61481548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.69672813" y3="-1.93734866" z3="-1.42348999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.17428619" y3="-0.98364817" z3="-1.30018802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83757459" y3="1.48439237" z3="-1.00501719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33996682" y3="0.31587499" z3="-0.45358925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70700395" y3="2.71048095" z3="-1.20510847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04151284" y3="2.73469055" z3="-0.83979296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36629522" y3="4.98531162" z3="-0.51305556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83342042" y3="3.82020535" z3="-1.01206835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72222806" y3="5.85903683" z3="-0.37290573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.18041052" y3="1.56464089" z3="-1.72440174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15641216" y3="0.35246177" z3="0.22589108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.77055548" y3="0.35605784" z3="-0.67572055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63522308" y3="0.71565842" z3="0.21035434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.75285281" y3="-0.89564702" z3="-1.52501841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08162036" y3="-2.46615803" z3="-1.35285127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83096916" y3="-5.40407062" z3="-6.3811933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59692984" y3="-4.98205015" z3="-5.39964348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.97897902" y3="-3.8737326" z3="-2.90652716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58116952" y3="-3.60325431" z3="-5.23078215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33421979" y3="-5.82267017" z3="-4.31544123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0395704" y3="-5.26258699" z3="-3.07819155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28159503" y3="-3.01847672" z3="-3.99072073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79471993" y3="-2.92539862" z3="-6.0609403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37193155" y3="-6.90919293" z3="-4.42753258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.869824" y3="-5.90654844" z3="-2.2110486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.60952208" y3="-3.34026651" z3="-1.64553267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.39511208" y3="-3.81225193" z3="-0.89648563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.75985388" y3="-4.80384422" z3="-1.1792973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40286461" y3="-3.54420851" z3="0.56045685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44080392" y3="-3.12964686" z3="3.33016637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.75193916" y3="-4.58653761" z3="1.42822608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08615004" y3="-2.28976762" z3="1.09185541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10369581" y3="-2.08542615" z3="2.4677932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.76289202" y3="-4.38213589" z3="2.8065843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.97672809" y3="-5.57809296" z3="1.02451729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15593647" y3="-1.44076581" z3="0.45076452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15562775" y3="-1.09550528" z3="2.85322366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00342328" y3="-5.21377147" z3="3.47424829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.443926" y3="-2.972125" z3="4.41270035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24416817" y3="-1.68219219" z3="-3.93383643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44327551" y3="-1.30450818" z3="-3.03111844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37368481" y3="3.64256977" z3="-1.22088484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15750314" y3="-2.88944747" z3="-1.68483451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93939448" y3="-3.11199856" z3="-0.54609047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08729955" y3="-2.29036102" z3="0.44038106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81366578" y3="-0.74904361" z3="0.80362458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.91460356" y3="-0.36511948" z3="-0.65149812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49820059" y3="0.50473782" z3="1.18478616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.8008668" y3="-1.12507389" z3="2.34835084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45851949" y3="-4.31943456" z3="-0.37897332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.19033187" y3="-4.60293113" z3="0.80372244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.35411366" y3="-0.2230309" z3="-1.58534926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.46416858" y3="0.57506101" z3="-0.47043807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.65316676" y3="-1.17108978" z3="-0.80958106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.69644211" y3="0.6270082" z3="0.43333099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-1.99812939" y3="0.24979037" z3="2.13601488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99789371" y3="1.48210175" z3="1.31592713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.25014962" y3="-0.19861844" z3="2.74863757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.61789073" y3="-1.84243867" z3="2.16235222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.143561" y3="-1.54552024" z3="3.13134407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.11586333" y3="-4.00478474" z3="0.83880634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.58351501" y3="-4.40236985" z3="1.69992803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.44203195" y3="-5.66993768" z3="0.74344286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.32016637" y3="-2.18936418" z3="-0.14009438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13865361" y3="-3.25080785" z3="-1.0379315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.45975983" y3="-4.40217566" z3="-0.65751909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97380432" y3="-4.48885823" z3="0.64190924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16064614" y3="-3.46681198" z3="1.5679324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82560825" y3="-2.31474617" z3="1.16692228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49088382" y3="-3.1521027" z3="-2.06793693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.28407724" y3="-5.21300606" z3="-1.36537721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.20804608" y3="-5.67133565" z3="1.03945422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75968327" y3="-3.57220106" z3="2.57697361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.94809966" y3="-1.49169202" z3="1.87300418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50494487" y3="3.99696646" z3="-0.18817466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86419257" y3="3.72986375" z3="-0.28104133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3407274" y3="3.0972835" z3="-1.42379757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.50299525" y3="2.76951088" z3="-2.48698728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.1467118" y3="3.04720012" z3="-2.37973377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.10627914" y3="4.43975251" z3="0.72778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54938153" y3="3.97716652" z3="0.52995684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.75892079" y3="2.73637223" z3="-1.49742612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.91488501" y3="2.28728486" z3="-3.37429318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.52290247" y3="2.76900226" z3="-3.19486255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.10484864" y3="-5.91062672" z3="2.22156233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.70375582" y3="-6.34165109" z3="0.15725091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.17520595" y3="2.25991095" z3="-2.53850755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.442538" y3="2.92310871" z3="-0.50704666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.73304679" y3="0.18090937" z3="-1.88796983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04390856" y3="1.4238256" z3="-1.77797089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.94448859" y3="0.11593913" z3="-2.63026119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.44108502" y3="1.22511598" z3="-3.26871556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.46903148" y3="-0.84241524" z3="-2.69376192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.37101478" y3="1.16292212" z3="-3.84071992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56725137" y3="2.54538192" z3="-2.48094721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73290969" y3="2.44896777" z3="-3.20247943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0277464" y3="3.49399839" z3="-2.45076415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.11303318" y3="3.32486997" z3="-3.73581022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57091707" y3="3.92917352" z3="-0.24883099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73015966" y3="5.0748628" z3="-0.13096409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89559385" y3="4.0137462" z3="0.26488221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37159117" y3="5.18220844" z3="0.80967602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53865331" y3="3.13216958" z3="0.23042847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.39277221" y3="5.2209512" z3="1.19930217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.25638388" y3="6.27426758" z3="0.42370974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.55037543" y3="6.33327155" z3="0.87810902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.60325045" y3="7.1496392" z3="0.4933697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.94331885" y3="7.25940672" z3="1.30673151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41211034" y3="-3.76395651" z3="-2.89635073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.60474968" y3="-4.81404157" z3="-2.62847456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28951168" y3="-3.39211829" z3="-3.45849894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54851975" y3="-3.73199844" z3="-3.57918878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70529343" y3="-1.48681177" z3="-1.99604261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46723036" y3="-0.94269946" z3="-2.58328696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46946704" y3="-0.89606543" z3="-1.09886016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79353121" y3="-1.51563159" z3="-2.61383295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9829,-.9463,-.6148;6.6967,-1.9373,-1.4235;6.1743,-.9836,-1.3002;4.8376,1.4844,-1.005;4.34,.3159,-.4536;2.707,2.7105,-1.2051;4.0415,2.7347,-.8398;2.3663,4.9853,-.5131;1.8334,3.8202,-1.0121;1.7222,5.859,-.3729;2.1804,1.5646,-1.7244;3.1564,.3525,.2259;1.7706,.3561,-.6757;.6352,.7157,.2104;1.7529,-.8956,-1.525;1.0816,-2.4662,-1.3529;1.831,-5.4041,-6.3812;1.5969,-4.9821,-5.3996;.979,-3.8737,-2.9065;1.5812,-3.6033,-5.2308;1.3342,-5.8227,-4.3154;1.0396,-5.2626,-3.0782;1.2816,-3.0185,-3.9907;1.7947,-2.9254,-6.0609;1.3719,-6.9092,-4.4275;.8698,-5.9065,-2.211;.6095,-3.3403,-1.6455;-.3951,-3.8123,-.8965;-.7599,-4.8038,-1.1793;-.4029,-3.5442,.5605;-.4408,-3.1296,3.3302;-.7519,-4.5865,1.4282;-.0862,-2.2898,1.0919;-.1037,-2.0854,2.4678;-.7629,-4.3821,2.8066;-.9767,-5.5781,1.0245;.1559,-1.4408,.4508;.1556,-1.0955,2.8532;-1.0034,-5.2138,3.4742;-.4439,-2.9721,4.4127;1.2442,-1.6822,-3.9338;1.4433,-1.3045,-3.0311;.3737,3.6426,-1.2209;-2.1575,-2.8894,-1.6848;-2.9394,-3.112,-.5461;-3.0873,-2.2904,.4404;-3.8137,-.749,.8036;-4.9146,-.3651,-.6515;-2.4982,.5047,1.1848;-4.8009,-1.1251,2.3484;-3.4585,-4.3194,-.379;-4.1903,-4.6029,.8037;-4.3541,-.223,-1.5853;-5.4642,.5751,-.4704;-5.6532,-1.1711,-.8096;-1.6964,.627,.4333;-1.9981,.2498,2.136;-2.9979,1.4821,1.3159;-5.2501,-.1986,2.7486;-5.6179,-1.8424,2.1624;-4.1436,-1.5455,3.1313;-5.1159,-4.0048,.8388;-3.5835,-4.4024,1.6999;-4.442,-5.6699,.7434;4.3202,-2.1894,-.1401;4.1387,-3.2508,-1.0379;3.4598,-4.4022,-.6575;2.9738,-4.4889,.6419;3.1606,-3.4668,1.5679;3.8256,-2.3147,1.1669;4.4909,-3.1521,-2.0679;3.2841,-5.213,-1.3654;2.208,-5.6713,1.0395;2.7597,-3.5722,2.577;3.9481,-1.4917,1.873;-.5049,3.997,-.1882;-1.8642,3.7299,-.281;-2.3407,3.0973,-1.4238;-1.503,2.7695,-2.487;-.1467,3.0472,-2.3797;-.1063,4.4398,.7278;-2.5494,3.9772,.53;-3.7589,2.7364,-1.4974;-1.9149,2.2873,-3.3743;.5229,2.769,-3.1949;2.1048,-5.9106,2.2216;1.7038,-6.3417,.1573;-4.1752,2.2599,-2.5385;-4.4425,2.9231,-.507;6.733,.1809,-1.888;6.0439,1.4238,-1.778;7.9445,.1159,-2.6303;8.4411,1.2251,-3.2687;8.469,-.8424,-2.6938;9.371,1.1629,-3.8407;6.5673,2.5454,-2.4809;7.7329,2.449,-3.2025;6.0277,3.494,-2.4508;8.113,3.3249,-3.7358;4.5709,3.9292,-.2488;3.7302,5.0749,-.131;5.8956,4.0137,.2649;6.3716,5.1822,.8097;6.5387,3.1322,.2304;7.3928,5.221,1.1993;4.2564,6.2743,.4237;5.5504,6.3333,.8781;3.6033,7.1496,.4934;5.9433,7.2594,1.3067;-2.4121,-3.764,-2.8964;-2.6047,-4.814,-2.6285;-3.2895,-3.3921,-3.4585;-1.5485,-3.732,-3.5792;-1.7053,-1.4868,-1.996;-2.4672,-.9427,-2.5833;-1.4695,-.8961,-1.0989;-.7935,-1.5156,-2.6138;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662453348874</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010895432645 0.001187869534 0.025079780329 0.005337513992</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.038747564 -0.005018188 0.000090710 0.000178631 0.000247782 0.000273968 0.000326946 0.000390608 0.000423511 0.000506019 0.000639230 0.000760353 0.000782945 0.000834881 0.000909599 0.001015542 0.001043425 0.001178542 0.001237941 0.001289886 0.001417503 0.001419664 0.001503534 0.001597952 0.001755671 0.001836368 0.001969318 0.002177893 0.002713435 0.003016288 0.003248877 0.003464279 0.003947873 0.004181347 0.004497360 0.004782142 0.004845063 0.005449945 0.005596386 0.005968048 0.006591511 0.006868478 0.007293163 0.007659852 0.007885060 0.008339640 0.008714843 0.009242788 0.009772112 0.010138089 0.010326844 0.012507752 0.012744720 0.013325291 0.014232556 0.014591604 0.014773669 0.015288007 0.015749304 0.015969582 0.016381286 0.016655652 0.017087276 0.017630384 0.018181458 0.019563174 0.020268554 0.021109244 0.022203050 0.022903408 0.023109091 0.024469592 0.025616714 0.025916521 0.026479311 0.026678093 0.026942079 0.027763961 0.029889362 0.030424531 0.031787176 0.031981028 0.032740712 0.035433782 0.037102405 0.038558580 0.038957397 0.039359599 0.040325926 0.040809853 0.042098028 0.045252398 0.045911324 0.046141172 0.049669091 0.050666568 0.051339647 0.051561303 0.051798409 0.052086615 0.052281485 0.052387197 0.052546139 0.053288367 0.053825102 0.054720255 0.056493240 0.056839931 0.056978700 0.057252373 0.057615251 0.058489398 0.059218253 0.059960348 0.060436432 0.060955415 0.061443096 0.061710353 0.064556614 0.064646763 0.065539929 0.067711272 0.068125842 0.069386723 0.071670074 0.072649346 0.076418518 0.077201400 0.080192011 0.081218970 0.082115134 0.086472216 0.089465240 0.090812000 0.092737216 0.092843220 0.094189020 0.095179649 0.095315845 0.095983197 0.096489793 0.096948425 0.098444740 0.099434573 0.099718912 0.101201656 0.102059430 0.102582339 0.103457641 0.103794892 0.104201759 0.106558671 0.107328069 0.108199256 0.108665050 0.110120811 0.112534590 0.113235381 0.115938498 0.116429576 0.117186781 0.119276891 0.122894031 0.125760632 0.126245449 0.127618093 0.128317354 0.129911066 0.133068385 0.135115023 0.136675983 0.141980614 0.142925174 0.144489236 0.145719120 0.146695554 0.151528825 0.152490054 0.157243293 0.159535663 0.169772900 0.171291815 0.173981984 0.174854990 0.180391335 0.183173831 0.185228499 0.187981770 0.188178613 0.193612463 0.201708999 0.203606307 0.204567396 0.206752987 0.207130537 0.208931837 0.209640756 0.210736453 0.212300504 0.215109026 0.216689497 0.224701954 0.231458357 0.232424656 0.233021986 0.234917064 0.244062766 0.248013078 0.254273632 0.254992419 0.256668701 0.258741096 0.271367404 0.276340252 0.289425938 0.295336517 0.297349802 0.299323384 0.304024227 0.305865452 0.307522535 0.311410615 0.320066983 0.321834294 0.324721242 0.327914610 0.345513674 0.348275060 0.349341513 0.350672674 0.354702870 0.358804407 0.363847328 0.369063651 0.380894626 0.386305298 0.404987066 0.425762457 0.430052431 0.444341698 0.462980850 0.463118330 0.475136034 0.475352160 0.477887170 0.481777292 0.498021637 0.508104322 0.541764288 0.563621738 0.566744646 0.574253685 0.583253563 0.604227965 0.621872068 0.638155761 0.643263940 0.665286089 0.670984137 0.681137276 0.681289619 0.689925492 0.691579288 0.704240019 0.704801202 0.709327987 0.713988844 0.737170479 0.750679316 0.771572670 0.775833037 0.797917641 0.810813212 0.815647218 0.818480875 0.820127405 0.821353928 0.824392267 0.829521616 0.830851133 0.840504941 0.844364464 0.846575772 0.848650701 0.856373858 0.859223677 0.867336640 0.871940702 0.874953962 0.886492903 0.887701702 0.893534201 0.905284309 0.914988750 0.923907555 0.930925995 0.933776200 0.956022949 0.958353246 0.969149563 0.975833957 0.989123667 0.999612310 1.012938149 1.034014711 1.042607979 1.049153579 1.055211765 1.072903928 1.084182300 1.088641590 1.109990063 1.110584666 1.116106329 1.122411511 1.123318220 1.134005386 1.142204611 1.161147740 1.168706447 1.172571782 1.173191135 1.200376112 1.203704510 1.214660027 1.247256553 1.290949923 1.295212499 1.297463303 1.314309339 1.326195562 1.326549338 1.330137457 1.334420188 1.340912508 1.345758128 1.354978881 1.362022594 1.378610399 1.379274934 1.380952033 1.381697978 1.557370813 1.671702696 1.674110694</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">40</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.97931203" y3="-0.94702195" z3="-0.61716366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.69266534" y3="-1.93851972" z3="-1.42636409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.17053246" y3="-0.98467698" z3="-1.30288836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83514752" y3="1.48389756" z3="-1.00671807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33707224" y3="0.31544933" z3="-0.45556537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70525131" y3="2.71186524" z3="-1.20413303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.04011799" y3="2.73466262" z3="-0.83994511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36663403" y3="4.9857296" z3="-0.50808419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83242332" y3="3.82165916" z3="-1.00815173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7232069" y3="5.85958566" z3="-0.36582795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.17753433" y3="1.56706442" z3="-1.724817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15368487" y3="0.35253908" z3="0.22415075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.76774216" y3="0.35760369" z3="-0.67727107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63298544" y3="0.71709298" z3="0.20954421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.74928738" y3="-0.89362634" z3="-1.5273845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08230812" y3="-2.46602981" z3="-1.35367975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83216146" y3="-5.40827558" z3="-6.37950985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59821094" y3="-4.98550731" z3="-5.3982608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98036164" y3="-3.87537131" z3="-2.90615996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58153427" y3="-3.60660133" z3="-5.23070491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33655007" y3="-5.82535503" z3="-4.31319419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04187056" y3="-5.26435105" z3="-3.07641309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2821132" y3="-3.02080068" z3="-3.99103697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79429264" y3="-2.92938593" z3="-6.06156103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.37503789" y3="-6.91193977" z3="-4.42430785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.87294108" y3="-5.9076648" z3="-2.2086498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61069709" y3="-3.3407738" z3="-1.64558545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.39082681" y3="-3.81464753" z3="-0.89423997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.75647796" y3="-4.80562176" z3="-1.17659325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39960691" y3="-3.54259917" z3="0.56135109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43391281" y3="-3.12153488" z3="3.32973859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74476592" y3="-4.58378392" z3="1.431728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08579487" y3="-2.28585865" z3="1.08912331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10147199" y3="-2.07818175" z3="2.46446657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.75359945" y3="-4.37613589" z3="2.80962789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.96760158" y3="-5.57682543" z3="1.03063477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15269864" y3="-1.43788577" z3="0.44510671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15568933" y3="-1.0865394" z3="2.84691152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.99039811" y3="-5.20694688" z3="3.47970592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4353884" y3="-2.96160888" z3="4.41192869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24410268" y3="-1.68460405" z3="-3.93545266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44191167" y3="-1.30547577" z3="-3.03303891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37214617" y3="3.64607107" z3="-1.21562373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15987322" y3="-2.89279449" z3="-1.68584523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93867517" y3="-3.11534363" z3="-0.54543603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08806867" y3="-2.29390462" z3="0.44145029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81599426" y3="-0.74927002" z3="0.7986159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.90833974" y3="-0.35933041" z3="-0.66111248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49802395" y3="0.49999429" z3="1.18933153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.81298278" y3="-1.12355368" z3="2.33649191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45472864" y3="-4.32364261" z3="-0.37574994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.18340159" y3="-4.60690796" z3="0.80917884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.32903388" y3="-0.21463041" z3="-1.59207856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.46045639" y3="0.580265" z3="-0.48065543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.64445223" y3="-1.16612405" z3="-0.83117916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.69534757" y3="0.61998091" z3="0.44596707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.00741799" y3="0.24804165" z3="2.1412801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99492141" y3="1.47982916" z3="1.31265049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.26315328" y3="-0.19601706" z3="2.73450275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.63205765" y3="-1.83854238" z3="2.14031546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.16137388" y3="-1.54617558" z3="3.12032912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.11039434" y3="-4.01078213" z3="0.84458565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.57527745" y3="-4.40269369" z3="1.70419431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.43279531" y3="-5.67509904" z3="0.75217262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31693947" y3="-2.19007765" z3="-0.14198367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13796203" y3="-3.25289892" z3="-1.03875186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46101829" y3="-4.40514778" z3="-0.65751364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97422368" y3="-4.49127417" z3="0.64164195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15811561" y3="-3.46765034" z3="1.56650756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82122431" y3="-2.31479135" z3="1.1646924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49100753" y3="-3.15488498" z3="-2.06854441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.2876949" y3="-5.21727236" z3="-1.3644789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.21083989" y3="-5.6749685" z3="1.04008505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75637287" y3="-3.57250117" z3="2.57530396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.94147427" y3="-1.49069703" z3="1.86992894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50472299" y3="3.99948491" z3="-0.18113275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86508876" y3="3.73720154" z3="-0.27445539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3451594" y3="3.11180022" z3="-1.42062247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.50815251" y3="2.78204942" z3="-2.48330156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.15072137" y3="3.05448157" z3="-2.37542825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.10398343" y3="4.43814457" z3="0.73616525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5484331" y3="3.98248505" z3="0.53905293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.76343237" y3="2.75155557" z3="-1.49227388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.92154245" y3="2.30166355" z3="-3.37051116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.51775034" y3="2.77559788" z3="-3.19109066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.10865257" y3="-5.91393233" z3="2.22230248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.70727809" y3="-6.34653788" z3="0.15837518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.17266654" y3="2.26662925" z3="-2.51913845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44689286" y3="2.93481171" z3="-0.50231594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.72963474" y3="0.17972155" z3="-1.89061371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.04117005" y3="1.42295764" z3="-1.78008377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.94088944" y3="0.11435274" z3="-2.63316786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.43791875" y3="1.22348493" z3="-3.27134825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.46494048" y3="-0.84424659" z3="-2.69704736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.36772667" y3="1.16100617" z3="-3.84351137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56491729" y3="2.54448062" z3="-2.48279616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.73037899" y3="2.44768683" z3="-3.20458875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02589492" y3="3.49336415" z3="-2.45213478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1108672" y3="3.32355789" z3="-3.73770408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57092898" y3="3.92797931" z3="-0.24785286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73102659" y3="5.0740406" z3="-0.12757908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89617177" y3="4.01101148" z3="0.26468436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37352674" y3="5.17850533" z3="0.81038074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53858478" y3="3.12902966" z3="0.2285851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.3951319" y3="5.21608162" z3="1.199021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.25863673" y3="6.27244753" z3="0.42796202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.55317377" y3="6.3300643" z3="0.88099971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.60615592" y3="7.14817399" z3="0.49938319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.94721858" y3="7.2554505" z3="1.31024742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.41085601" y3="-3.772573" z3="-2.89453319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.59976721" y3="-4.82267123" z3="-2.62386695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28982053" y3="-3.40530656" z3="-3.45738095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54780839" y3="-3.73957473" z3="-3.57805805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70870762" y3="-1.49144626" z3="-2.00128837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46853688" y3="-0.95407542" z3="-2.59978823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48294768" y3="-0.89322561" z3="-1.10515351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79115534" y3="-1.52125026" z3="-2.61201915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9793,-.947,-.6172;6.6927,-1.9385,-1.4264;6.1705,-.9847,-1.3029;4.8351,1.4839,-1.0067;4.3371,.3154,-.4556;2.7053,2.7119,-1.2041;4.0401,2.7347,-.8399;2.3666,4.9857,-.5081;1.8324,3.8217,-1.0082;1.7232,5.8596,-.3658;2.1775,1.5671,-1.7248;3.1537,.3525,.2242;1.7677,.3576,-.6773;.633,.7171,.2095;1.7493,-.8936,-1.5274;1.0823,-2.466,-1.3537;1.8322,-5.4083,-6.3795;1.5982,-4.9855,-5.3983;.9804,-3.8754,-2.9062;1.5815,-3.6066,-5.2307;1.3366,-5.8254,-4.3132;1.0419,-5.2644,-3.0764;1.2821,-3.0208,-3.991;1.7943,-2.9294,-6.0616;1.375,-6.9119,-4.4243;.8729,-5.9077,-2.2086;.6107,-3.3408,-1.6456;-.3908,-3.8146,-.8942;-.7565,-4.8056,-1.1766;-.3996,-3.5426,.5614;-.4339,-3.1215,3.3297;-.7448,-4.5838,1.4317;-.0858,-2.2859,1.0891;-.1015,-2.0782,2.4645;-.7536,-4.3761,2.8096;-.9676,-5.5768,1.0306;.1527,-1.4379,.4451;.1557,-1.0865,2.8469;-.9904,-5.2069,3.4797;-.4354,-2.9616,4.4119;1.2441,-1.6846,-3.9355;1.4419,-1.3055,-3.033;.3721,3.6461,-1.2156;-2.1599,-2.8928,-1.6858;-2.9387,-3.1153,-.5454;-3.0881,-2.2939,.4415;-3.816,-.7493,.7986;-4.9083,-.3593,-.6611;-2.498,.5,1.1893;-4.813,-1.1236,2.3365;-3.4547,-4.3236,-.3757;-4.1834,-4.6069,.8092;-4.329,-.2146,-1.5921;-5.4605,.5803,-.4807;-5.6445,-1.1661,-.8312;-1.6953,.62,.446;-2.0074,.248,2.1413;-2.9949,1.4798,1.3127;-5.2632,-.196,2.7345;-5.6321,-1.8385,2.1403;-4.1614,-1.5462,3.1203;-5.1104,-4.0108,.8446;-3.5753,-4.4027,1.7042;-4.4328,-5.6751,.7522;4.3169,-2.1901,-.142;4.138,-3.2529,-1.0388;3.461,-4.4051,-.6575;2.9742,-4.4913,.6416;3.1581,-3.4677,1.5665;3.8212,-2.3148,1.1647;4.491,-3.1549,-2.0685;3.2877,-5.2173,-1.3645;2.2108,-5.675,1.0401;2.7564,-3.5725,2.5753;3.9415,-1.4907,1.8699;-.5047,3.9995,-.1811;-1.8651,3.7372,-.2745;-2.3452,3.1118,-1.4206;-1.5082,2.782,-2.4833;-.1507,3.0545,-2.3754;-.104,4.4381,.7362;-2.5484,3.9825,.5391;-3.7634,2.7516,-1.4923;-1.9215,2.3017,-3.3705;.5178,2.7756,-3.1911;2.1087,-5.9139,2.2223;1.7073,-6.3465,.1584;-4.1727,2.2666,-2.5191;-4.4469,2.9348,-.5023;6.7296,.1797,-1.8906;6.0412,1.423,-1.7801;7.9409,.1144,-2.6332;8.4379,1.2235,-3.2713;8.4649,-.8442,-2.697;9.3677,1.161,-3.8435;6.5649,2.5445,-2.4828;7.7304,2.4477,-3.2046;6.0259,3.4934,-2.4521;8.1109,3.3236,-3.7377;4.5709,3.928,-.2479;3.731,5.074,-.1276;5.8962,4.011,.2647;6.3735,5.1785,.8104;6.5386,3.129,.2286;7.3951,5.2161,1.199;4.2586,6.2724,.428;5.5532,6.3301,.881;3.6062,7.1482,.4994;5.9472,7.2555,1.3102;-2.4109,-3.7726,-2.8945;-2.5998,-4.8227,-2.6239;-3.2898,-3.4053,-3.4574;-1.5478,-3.7396,-3.5781;-1.7087,-1.4914,-2.0013;-2.4685,-.9541,-2.5998;-1.4829,-.8932,-1.1052;-.7912,-1.5213,-2.612;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662477436046</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.014032970197 0.001230478969 0.028233588834 0.005338157480</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.038884152 -0.005598658 0.000090567 0.000178515 0.000250933 0.000278031 0.000327026 0.000390597 0.000425839 0.000508990 0.000639507 0.000761877 0.000782911 0.000834858 0.000909718 0.001016012 0.001043411 0.001178797 0.001238371 0.001290039 0.001417680 0.001420168 0.001503377 0.001597880 0.001755932 0.001837311 0.001969513 0.002179026 0.002713679 0.003019829 0.003254218 0.003471977 0.003948183 0.004185439 0.004499224 0.004784679 0.004848880 0.005456927 0.005616098 0.005988645 0.006598237 0.006868420 0.007297927 0.007684161 0.007884596 0.008340365 0.008718881 0.009257123 0.009775771 0.010140279 0.010331927 0.012510553 0.012745357 0.013325546 0.014234801 0.014591703 0.014781387 0.015288615 0.015776331 0.015976763 0.016382227 0.016976203 0.017086860 0.018110597 0.018226323 0.020060129 0.020274368 0.021134725 0.022203872 0.022903037 0.023108274 0.024469462 0.025618011 0.025920962 0.026484853 0.026696507 0.027147122 0.027764875 0.029940484 0.030427595 0.031969688 0.032162535 0.032791142 0.035431409 0.037140765 0.038575117 0.039119851 0.039411305 0.040331494 0.040889420 0.042102268 0.045258255 0.045944788 0.046158061 0.049669100 0.050667326 0.051348696 0.051565216 0.051798955 0.052281431 0.052385729 0.052485031 0.052582099 0.053491709 0.053825470 0.054728978 0.056493325 0.056840357 0.056978807 0.057263201 0.057624745 0.058499684 0.059219865 0.059979622 0.060441649 0.061060464 0.061444262 0.061728298 0.064556686 0.064653518 0.065546225 0.067711100 0.068128657 0.069401498 0.071715099 0.072651370 0.076436069 0.077387256 0.080220286 0.081220411 0.082140178 0.086594596 0.089468209 0.090812187 0.092817279 0.092864561 0.094191495 0.095201216 0.095322439 0.096046713 0.096490685 0.096978988 0.098446502 0.099434882 0.099806969 0.101202908 0.102114241 0.102590132 0.103494603 0.103795058 0.104232443 0.106571933 0.107463406 0.108199172 0.108673228 0.110125318 0.112534587 0.113238306 0.115950672 0.116436269 0.117225067 0.119287914 0.122931725 0.126067250 0.126375225 0.127643995 0.128419919 0.129913827 0.133069884 0.135114992 0.136675607 0.142000856 0.142963272 0.144513651 0.145720714 0.146696697 0.152179861 0.152492550 0.157248459 0.159553250 0.169793928 0.171668760 0.173985398 0.175054062 0.180400820 0.183185138 0.185248889 0.187986208 0.188190565 0.193651100 0.201716844 0.203794781 0.204605355 0.206753480 0.207133612 0.208965342 0.209737963 0.210783714 0.212321999 0.215126923 0.216694050 0.224717629 0.231464263 0.232454273 0.233064290 0.234928530 0.244121944 0.248013890 0.254295417 0.254996634 0.256670720 0.258765391 0.271367400 0.276454282 0.289489227 0.295433007 0.297376532 0.299332146 0.304064108 0.305884010 0.307522928 0.311409808 0.320136245 0.321918795 0.324722292 0.328043376 0.345538160 0.349036106 0.350309760 0.351170663 0.354720248 0.358804987 0.363847877 0.369198234 0.380913588 0.387060257 0.405017728 0.425821197 0.430052406 0.444347005 0.462990177 0.463117258 0.475133935 0.475356993 0.477887166 0.482068508 0.498021866 0.508210081 0.541800167 0.563756273 0.566749486 0.574679214 0.583254670 0.604240908 0.622101509 0.638147842 0.643296585 0.665286515 0.671065814 0.681165216 0.681289642 0.689925309 0.691581376 0.704240033 0.704837653 0.709749891 0.714037255 0.737178628 0.750679321 0.771572843 0.775833761 0.797933119 0.811800411 0.815677539 0.818550809 0.820193186 0.821399448 0.825183504 0.829552102 0.830880437 0.840504973 0.844385900 0.846802139 0.848658159 0.856387852 0.859225453 0.867336919 0.871988061 0.875012852 0.886498107 0.887708420 0.893591471 0.906880644 0.915003119 0.923907593 0.930931148 0.933776147 0.956085668 0.958353247 0.969155930 0.975835603 0.989124001 0.999612435 1.012939995 1.034014702 1.042608046 1.049153604 1.055212200 1.072914326 1.084182394 1.088641615 1.109990176 1.110584683 1.116107279 1.122411553 1.123318217 1.134005404 1.142204681 1.161148063 1.168707261 1.172572186 1.173192389 1.200377495 1.203726865 1.214660705 1.247258191 1.291208338 1.295427318 1.299421749 1.314370139 1.326214563 1.326591195 1.330137434 1.334420478 1.340912897 1.345758627 1.357750151 1.362022929 1.378740100 1.380352910 1.380989183 1.382040205 1.557370826 1.671816181 1.681888495</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">41</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.97616392" y3="-0.94757841" z3="-0.6194727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.68912671" y3="-1.93937057" z3="-1.42923106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.16719005" y3="-0.98544055" z3="-1.30559113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83292545" y3="1.48353062" z3="-1.00837338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33442942" y3="0.31511911" z3="-0.45747312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70372126" y3="2.71328455" z3="-1.2032638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03889752" y3="2.73474488" z3="-0.84009447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36712466" y3="4.98633366" z3="-0.50354827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83181597" y3="3.823333" z3="-1.00485826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72425568" y3="5.86025847" z3="-0.3592927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.17486137" y3="1.56952905" z3="-1.72502819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15128483" y3="0.35272163" z3="0.22265416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.76510558" y3="0.3591678" z3="-0.67845441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63068339" y3="0.71874378" z3="0.20885714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.74603248" y3="-0.89141769" z3="-1.52928048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08193627" y3="-2.46591732" z3="-1.35456576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83353599" y3="-5.41189409" z3="-6.3778757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59964176" y3="-4.98850208" z3="-5.39688723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98142201" y3="-3.87672267" z3="-2.90547086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58191025" y3="-3.60945165" z3="-5.23045658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.33905549" y3="-5.82761196" z3="-4.31100769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.04421123" y3="-5.26578809" z3="-3.07461691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28233779" y3="-3.0229167" z3="-3.99122167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79377735" y3="-2.93274698" z3="-6.06196109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.3784782" y3="-6.9142641" z3="-4.42119372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.87607536" y3="-5.90849947" z3="-2.20623291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6113902" y3="-3.34134418" z3="-1.64551389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3919245" y3="-3.81370493" z3="-0.89448159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.75405182" y3="-4.80721566" z3="-1.17373495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39799886" y3="-3.54085376" z3="0.5615858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42757249" y3="-3.11471997" z3="3.32938176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.7384779" y3="-4.58135772" z3="1.43471036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08641439" y3="-2.28246404" z3="1.08646073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09950652" y3="-2.07218689" z3="2.46142832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.74520546" y3="-4.37102142" z3="2.81228259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.95979412" y3="-5.5756887" z3="1.03602347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14837283" y3="-1.4350891" z3="0.44026887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1560258" y3="-1.07909377" z3="2.84115627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.97889436" y3="-5.20100386" z3="3.4843345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42742305" y3="-2.95271135" z3="4.41124675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2433081" y3="-1.68661731" z3="-3.93673211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44039812" y3="-1.30643831" z3="-3.03468678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.37124087" y3="3.64922436" z3="-1.21076405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15711782" y3="-2.8990725" z3="-1.68499386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93762519" y3="-3.11897683" z3="-0.54425355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.08935564" y3="-2.29490459" z3="0.43947064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81560383" y3="-0.74926461" z3="0.7930144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.89782997" y3="-0.35550475" z3="-0.67322113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49997466" y3="0.49774438" z3="1.19047133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.82425557" y3="-1.12265998" z3="2.32366933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45132521" y3="-4.32717557" z3="-0.37210241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.17770975" y3="-4.61021896" z3="0.81430834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.32096953" y3="-0.20370556" z3="-1.59780856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.45393626" y3="0.58244393" z3="-0.49166321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.63365448" y3="-1.16069172" z3="-0.85176961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.67430278" y3="0.60380423" z3="0.4574827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.0280528" y3="0.25002096" z3="2.16236523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99625267" y3="1.48202514" z3="1.29739406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.27392335" y3="-0.19485595" z3="2.72061662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.64394952" y3="-1.83389881" z3="2.12312479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.18087388" y3="-1.54969695" z3="3.11597791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.10617739" y3="-4.01638748" z3="0.85022315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56839447" y3="-4.40312123" z3="1.70760937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.42427797" y3="-5.67895153" z3="0.75918131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31428518" y3="-2.1907082" z3="-0.14378745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13763065" y3="-3.25483345" z3="-1.03948052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46244398" y3="-4.40782245" z3="-0.65739506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97495377" y3="-4.49336813" z3="0.64153163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15625012" y3="-3.46831134" z3="1.56527428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81764569" y3="-2.31476644" z3="1.16262413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49135343" y3="-3.15750514" z3="-2.06910554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.29116633" y3="-5.22108393" z3="-1.3635086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.21372574" y3="-5.67809887" z3="1.04091978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75387378" y3="-3.57261276" z3="2.57388796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.93593402" y3="-1.48971303" z3="1.86702615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50396494" y3="4.00221053" z3="-0.17461619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86428895" y3="3.74035649" z3="-0.26549424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.34517476" y3="3.1141433" z3="-1.40926872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.51118156" y3="2.78863273" z3="-2.47642055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.15359813" y3="3.06045799" z3="-2.37089189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.1019053" y3="4.43960672" z3="0.74223648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54716597" y3="3.9870662" z3="0.54746551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.76515403" y3="2.76013646" z3="-1.48231035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.92700428" y3="2.31307325" z3="-3.36571137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.51335045" y3="2.78312642" z3="-3.18864476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1121911" y3="-5.91641759" z3="2.22334676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.71120057" y3="-6.35120908" z3="0.15982517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.18691319" y3="2.29486283" z3="-2.5256181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44701139" y3="2.94536217" z3="-0.49500169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.72649439" y3="0.17882175" z3="-1.89335855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.03859891" y3="1.42231037" z3="-1.78224621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.93748593" y3="0.1131396" z3="-2.63632737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.43479011" y3="1.22224775" z3="-3.27433217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.46111265" y3="-0.84566331" z3="-2.70065458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.36439107" y3="1.15953863" z3="-3.84681069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56262442" y3="2.54383178" z3="-2.48475181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.7278137" y3="2.44674592" z3="-3.20695205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.02403932" y3="3.4929505" z3="-2.45356184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.1085406" y3="3.32261444" z3="-3.73990269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57100631" y3="3.92699152" z3="-0.24701324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73190594" y3="5.07337297" z3="-0.12436679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89681562" y3="4.0086819" z3="0.26426355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37537813" y3="5.1752637" z3="0.81085423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53871089" y3="3.12640235" z3="0.22639213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.39742744" y3="5.21182444" z3="1.1984057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.26069016" y3="6.27079737" z3="0.43212313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.555742" y3="6.32718671" z3="0.88379091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.608691" y3="7.1467277" z3="0.50532259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.9507377" y3="7.2518504" z3="1.31370994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40912419" y3="-3.78077721" z3="-2.89204502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5953895" y3="-4.83065774" z3="-2.61950951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28938921" y3="-3.41629594" z3="-3.45424721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54693855" y3="-3.74712111" z3="-3.57661175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71088503" y3="-1.4967066" z3="-2.00564964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46929154" y3="-0.96559206" z3="-2.60848057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49016078" y3="-0.89429817" z3="-1.1127696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79170626" y3="-1.52541504" z3="-2.61231507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9762,-.9476,-.6195;6.6891,-1.9394,-1.4292;6.1672,-.9854,-1.3056;4.8329,1.4835,-1.0084;4.3344,.3151,-.4575;2.7037,2.7133,-1.2033;4.0389,2.7347,-.8401;2.3671,4.9863,-.5035;1.8318,3.8233,-1.0049;1.7243,5.8603,-.3593;2.1749,1.5695,-1.725;3.1513,.3527,.2227;1.7651,.3592,-.6785;.6307,.7187,.2089;1.746,-.8914,-1.5293;1.0819,-2.4659,-1.3546;1.8335,-5.4119,-6.3779;1.5996,-4.9885,-5.3969;.9814,-3.8767,-2.9055;1.5819,-3.6095,-5.2305;1.3391,-5.8276,-4.311;1.0442,-5.2658,-3.0746;1.2823,-3.0229,-3.9912;1.7938,-2.9327,-6.062;1.3785,-6.9143,-4.4212;.8761,-5.9085,-2.2062;.6114,-3.3413,-1.6455;-.3919,-3.8137,-.8945;-.7541,-4.8072,-1.1737;-.398,-3.5409,.5616;-.4276,-3.1147,3.3294;-.7385,-4.5814,1.4347;-.0864,-2.2825,1.0865;-.0995,-2.0722,2.4614;-.7452,-4.371,2.8123;-.9598,-5.5757,1.036;.1484,-1.4351,.4403;.156,-1.0791,2.8412;-.9789,-5.201,3.4843;-.4274,-2.9527,4.4112;1.2433,-1.6866,-3.9367;1.4404,-1.3064,-3.0347;.3712,3.6492,-1.2108;-2.1571,-2.8991,-1.685;-2.9376,-3.119,-.5443;-3.0894,-2.2949,.4395;-3.8156,-.7493,.793;-4.8978,-.3555,-.6732;-2.5,.4977,1.1905;-4.8243,-1.1227,2.3237;-3.4513,-4.3272,-.3721;-4.1777,-4.6102,.8143;-4.321,-.2037,-1.5978;-5.4539,.5824,-.4917;-5.6337,-1.1607,-.8518;-1.6743,.6038,.4575;-2.0281,.25,2.1624;-2.9963,1.482,1.2974;-5.2739,-.1949,2.7206;-5.6439,-1.8339,2.1231;-4.1809,-1.5497,3.116;-5.1062,-4.0164,.8502;-3.5684,-4.4031,1.7076;-4.4243,-5.679,.7592;4.3143,-2.1907,-.1438;4.1376,-3.2548,-1.0395;3.4624,-4.4078,-.6574;2.975,-4.4934,.6415;3.1563,-3.4683,1.5653;3.8176,-2.3148,1.1626;4.4914,-3.1575,-2.0691;3.2912,-5.2211,-1.3635;2.2137,-5.6781,1.0409;2.7539,-3.5726,2.5739;3.9359,-1.4897,1.867;-.504,4.0022,-.1746;-1.8643,3.7404,-.2655;-2.3452,3.1141,-1.4093;-1.5112,2.7886,-2.4764;-.1536,3.0605,-2.3709;-.1019,4.4396,.7422;-2.5472,3.9871,.5475;-3.7652,2.7601,-1.4823;-1.927,2.3131,-3.3657;.5134,2.7831,-3.1886;2.1122,-5.9164,2.2233;1.7112,-6.3512,.1598;-4.1869,2.2949,-2.5256;-4.447,2.9454,-.495;6.7265,.1788,-1.8934;6.0386,1.4223,-1.7822;7.9375,.1131,-2.6363;8.4348,1.2222,-3.2743;8.4611,-.8457,-2.7007;9.3644,1.1595,-3.8468;6.5626,2.5438,-2.4848;7.7278,2.4467,-3.207;6.024,3.493,-2.4536;8.1085,3.3226,-3.7399;4.571,3.927,-.247;3.7319,5.0734,-.1244;5.8968,4.0087,.2643;6.3754,5.1753,.8109;6.5387,3.1264,.2264;7.3974,5.2118,1.1984;4.2607,6.2708,.4321;5.5557,6.3272,.8838;3.6087,7.1467,.5053;5.9507,7.2519,1.3137;-2.4091,-3.7808,-2.892;-2.5954,-4.8307,-2.6195;-3.2894,-3.4163,-3.4542;-1.5469,-3.7471,-3.5766;-1.7109,-1.4967,-2.0056;-2.4693,-.9656,-2.6085;-1.4902,-.8943,-1.1128;-.7917,-1.5254,-2.6123;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662498415419</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.017653074417 0.001308592659 0.019941846823 0.005338030829</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.039154215 -0.005879273 0.000095412 0.000179124 0.000251125 0.000282513 0.000327056 0.000391343 0.000426663 0.000508899 0.000640205 0.000762035 0.000783408 0.000835430 0.000910157 0.001015949 0.001043655 0.001180460 0.001241624 0.001290182 0.001418782 0.001420686 0.001503848 0.001598868 0.001756132 0.001844741 0.001969725 0.002181151 0.002713781 0.003022865 0.003254297 0.003474332 0.003948550 0.004208063 0.004500713 0.004786140 0.004848830 0.005461015 0.005628165 0.006012482 0.006610079 0.006869045 0.007301490 0.007744563 0.007894588 0.008344340 0.008719833 0.009271945 0.009775720 0.010146728 0.010333823 0.012512508 0.012750095 0.013325903 0.014242194 0.014591650 0.014781134 0.015290408 0.015781656 0.015976832 0.016382355 0.017003402 0.017093347 0.018153218 0.018562206 0.020252201 0.020816401 0.021248805 0.022206272 0.022973769 0.023136697 0.024478394 0.025619812 0.025922887 0.026484990 0.026697651 0.027134303 0.027764931 0.029948993 0.030428253 0.031968889 0.032344084 0.032839591 0.035534500 0.037411054 0.038594255 0.039229978 0.039409475 0.040333084 0.040926498 0.042106607 0.045258594 0.045948478 0.046159139 0.049669096 0.050667275 0.051352870 0.051566593 0.051799159 0.052281427 0.052386132 0.052518428 0.052634340 0.053822206 0.054133570 0.054767594 0.056493326 0.056840938 0.056979050 0.057268067 0.057633332 0.058502534 0.059220645 0.059980168 0.060442555 0.061052887 0.061444114 0.061735648 0.064556702 0.064672422 0.065550563 0.067711080 0.068129616 0.069400028 0.071757583 0.072654366 0.076450598 0.077619076 0.080231306 0.081223735 0.082168757 0.086748522 0.089471866 0.090812229 0.092834283 0.092969856 0.094194937 0.095221022 0.095326420 0.096139837 0.096490891 0.097018772 0.098446598 0.099435358 0.099836146 0.101206011 0.102175012 0.102598109 0.103525355 0.103797134 0.104230412 0.106579485 0.107626503 0.108199190 0.108684779 0.110132421 0.112534661 0.113243635 0.115955262 0.116443069 0.117255657 0.119291969 0.122943398 0.126103502 0.126977346 0.127776273 0.128620701 0.129927126 0.133079539 0.135119005 0.136675331 0.142026017 0.142979152 0.144539037 0.145722633 0.146696810 0.152487051 0.152521624 0.157256430 0.159557270 0.169853667 0.171775386 0.173997171 0.175315709 0.180417065 0.183200268 0.185294366 0.187994238 0.188202613 0.193709662 0.201722081 0.204035664 0.204658298 0.206756211 0.207137405 0.208994896 0.209909052 0.210775788 0.212379938 0.215166278 0.216706853 0.224738748 0.231472517 0.232491256 0.233140994 0.234949079 0.244201002 0.248014738 0.254328120 0.255003089 0.256675302 0.258786516 0.271367404 0.276633812 0.289596967 0.295589031 0.297375908 0.299335034 0.304093333 0.305921058 0.307523095 0.311423873 0.320256205 0.322077114 0.324726335 0.328204913 0.345537937 0.349098651 0.350565970 0.354411145 0.355119883 0.358809444 0.363854847 0.369307155 0.380913365 0.388264606 0.405021116 0.425877939 0.430053027 0.444349026 0.462990813 0.463134966 0.475158821 0.475381119 0.477887173 0.482242331 0.498022193 0.508213629 0.541803691 0.563774120 0.566752045 0.574743708 0.583255624 0.604248304 0.622953115 0.638535735 0.643299602 0.665287173 0.671086755 0.681185101 0.681289710 0.689926625 0.691581504 0.704240132 0.704877495 0.710948050 0.714066113 0.737179853 0.750679328 0.771573015 0.775833963 0.797941230 0.812273143 0.815706626 0.818582599 0.820216873 0.821412365 0.825596751 0.829551619 0.830900593 0.840505014 0.844385699 0.846839353 0.848658421 0.856392332 0.859225444 0.867337011 0.872018691 0.875123104 0.886510101 0.887714972 0.893630970 0.909224090 0.915087088 0.923908143 0.930942793 0.933784813 0.956108823 0.958353530 0.969159676 0.975838217 0.989126168 0.999612927 1.012940578 1.034015136 1.042608212 1.049153592 1.055212624 1.072916667 1.084183000 1.088642380 1.109990319 1.110584782 1.116107425 1.122411571 1.123318211 1.134006505 1.142207702 1.161148134 1.168708674 1.172572462 1.173194388 1.200379926 1.203768578 1.214660976 1.247259720 1.291262119 1.295441334 1.299958772 1.314403363 1.326234057 1.326638925 1.330137518 1.334420632 1.340913404 1.345758646 1.358304852 1.362023095 1.378761195 1.380812870 1.381126921 1.382973231 1.557370955 1.671829870 1.694384941</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">42</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.97273917" y3="-0.94823725" z3="-0.62204422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.68530882" y3="-1.94035013" z3="-1.43231077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.16355905" y3="-0.9863382" z3="-1.30855697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.83048709" y3="1.48305385" z3="-1.01015159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33153597" y3="0.3146625" z3="-0.45961438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70207316" y3="2.71473687" z3="-1.20222049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03760039" y3="2.73475183" z3="-0.84022681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36780266" y3="4.98690108" z3="-0.49870381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83105954" y3="3.8249994" z3="-1.00112142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72569905" y3="5.8610523" z3="-0.35239608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.17200974" y3="1.57191839" z3="-1.72521265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14858367" y3="0.35257434" z3="0.22084895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.76215169" y3="0.36077236" z3="-0.67982332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62838852" y3="0.72011485" z3="0.20836502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.74194631" y3="-0.88942836" z3="-1.53144325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08270579" y3="-2.46576836" z3="-1.35458494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83532185" y3="-5.41584651" z3="-6.37564371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60132512" y3="-4.99172321" z3="-5.39499654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.9830354" y3="-3.8782756" z3="-2.90470632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58236974" y3="-3.61258445" z3="-5.22993962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34190862" y3="-5.83014458" z3="-4.30825393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0468844" y3="-5.26744704" z3="-3.07237954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28283722" y3="-3.02498562" z3="-3.9910824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79342529" y3="-2.93651083" z3="-6.0621433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.3823482" y3="-6.91684821" z3="-4.41741663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.87966277" y3="-5.9095567" z3="-2.203386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61281525" y3="-3.34211171" z3="-1.64481254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.38557836" y3="-3.81781294" z3="-0.89118601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.75020292" y3="-4.80966776" z3="-1.17101466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39514991" y3="-3.53941518" z3="0.56279343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42136793" y3="-3.10695729" z3="3.32919588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73189003" y3="-4.57885267" z3="1.43840588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08723922" y3="-2.27851456" z3="1.08409456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09848646" y3="-2.06499874" z3="2.45843868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73659069" y3="-4.36537087" z3="2.81546794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.95091923" y3="-5.574782" z3="1.04223707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14445207" y3="-1.43251796" z3="0.43543007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15482057" y3="-1.07023792" z3="2.83534774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.96653915" y3="-5.19462936" z3="3.48984148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41919728" y3="-2.9428027" z3="4.41074423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24305985" y3="-1.68884962" z3="-3.93803136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43859163" y3="-1.30702935" z3="-3.03625865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36996056" y3="3.652922" z3="-1.205777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16186819" y3="-2.90159679" z3="-1.68790507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93727438" y3="-3.12236079" z3="-0.54542622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09154069" y3="-2.29497039" z3="0.43595976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81662164" y3="-0.74988616" z3="0.78668833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.88950437" y3="-0.35045396" z3="-0.68537293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49770175" y3="0.49310876" z3="1.19670778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.83823482" y3="-1.12200031" z3="2.31083496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44530834" y3="-4.33419341" z3="-0.36664939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.17094117" y3="-4.6141295" z3="0.82032901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.30778727" y3="-0.19458831" z3="-1.60702965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.44621303" y3="0.58597923" z3="-0.50241345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.62141974" y3="-1.15662722" z3="-0.86940806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.67752073" y3="0.59853512" z3="0.47149572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.03452175" y3="0.2478333" z3="2.16465232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98991817" y3="1.47695294" z3="1.29727969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.28606548" y3="-0.19109436" z3="2.70425568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.65947252" y3="-1.82977345" z3="2.10451115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.20081572" y3="-1.55137558" z3="3.10314574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09948088" y3="-4.02089294" z3="0.85591633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56233856" y3="-4.40506839" z3="1.71320525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.41694449" y3="-5.6827901" z3="0.76731652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31136933" y3="-2.1913884" z3="-0.14575018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13717081" y3="-3.25698633" z3="-1.0402305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46397168" y3="-4.41080864" z3="-0.6570997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97570793" y3="-4.49562518" z3="0.64160101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1542218" y3="-3.46890979" z3="1.56406859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81378493" y3="-2.31466278" z3="1.16040865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49164914" y3="-3.16048148" z3="-2.06967513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.29502156" y3="-5.22545661" z3="-1.36220718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.21694077" y3="-5.68156146" z3="1.04212637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75128124" y3="-3.57256975" z3="2.57253201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.93001935" y3="-1.48851617" z3="1.86386379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50359154" y3="4.00514059" z3="-0.168038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86512545" y3="3.74837851" z3="-0.25981392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.35032933" y3="3.13095698" z3="-1.40879747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.51617614" y3="2.80143556" z3="-2.47340806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.15728046" y3="3.0673752" z3="-2.36655355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.09944776" y3="4.43920819" z3="0.7499301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54579998" y3="3.99289885" z3="0.55633951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.7710426" y3="2.77878777" z3="-1.48056034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.93304763" y3="2.32654384" z3="-3.36166338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.50856811" y3="2.7894369" z3="-3.18465936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1161762" y3="-5.91918699" z3="2.22474186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.71552031" y3="-6.35634278" z3="0.16161617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.18750715" y3="2.31321639" z3="-2.51460074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44699866" y3="2.94475696" z3="-0.47718734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.72306526" y3="0.17779482" z3="-1.89633839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.03578482" y3="1.42154939" z3="-1.78455314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.93374923" y3="0.1117944" z3="-2.63978607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.43131036" y3="1.22089637" z3="-3.27759147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.45691944" y3="-0.84722182" z3="-2.70462739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.36066099" y3="1.15795988" z3="-3.85045082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.56008008" y3="2.54310367" z3="-2.48680094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.72494702" y3="2.445717" z3="-3.20947796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.0219771" y3="3.49247826" z3="-2.4549829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10592051" y3="3.32159871" z3="-3.74222904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5712492" y3="3.92580883" z3="-0.24605936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.733052" y3="5.07255356" z3="-0.1208711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89768947" y3="4.00593928" z3="0.26387752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37761092" y3="5.17144671" z3="0.8115992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53902215" y3="3.12334076" z3="0.22398188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.40014415" y3="5.20682913" z3="1.19799995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.26317831" y3="6.26883395" z3="0.43685595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.5587686" y3="6.32376718" z3="0.8871794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.61178663" y3="7.1450507" z3="0.51212307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.95481729" y3="7.24755339" z3="1.3180459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40861027" y3="-3.78985279" z3="-2.89119318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.59126653" y3="-4.83965382" z3="-2.6143319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.29028743" y3="-3.43076624" z3="-3.45531142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54635931" y3="-3.75576569" z3="-3.57552246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7140645" y3="-1.50175567" z3="-2.01102279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4699193" y3="-0.97493809" z3="-2.62180023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50054502" y3="-0.89433727" z3="-1.11904095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79088862" y3="-1.53116928" z3="-2.61255933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9727,-.9482,-.622;6.6853,-1.9404,-1.4323;6.1636,-.9863,-1.3086;4.8305,1.4831,-1.0102;4.3315,.3147,-.4596;2.7021,2.7147,-1.2022;4.0376,2.7348,-.8402;2.3678,4.9869,-.4987;1.8311,3.825,-1.0011;1.7257,5.8611,-.3524;2.172,1.5719,-1.7252;3.1486,.3526,.2208;1.7622,.3608,-.6798;.6284,.7201,.2084;1.7419,-.8894,-1.5314;1.0827,-2.4658,-1.3546;1.8353,-5.4158,-6.3756;1.6013,-4.9917,-5.395;.983,-3.8783,-2.9047;1.5824,-3.6126,-5.2299;1.3419,-5.8301,-4.3083;1.0469,-5.2674,-3.0724;1.2828,-3.025,-3.9911;1.7934,-2.9365,-6.0621;1.3823,-6.9168,-4.4174;.8797,-5.9096,-2.2034;.6128,-3.3421,-1.6448;-.3856,-3.8178,-.8912;-.7502,-4.8097,-1.171;-.3951,-3.5394,.5628;-.4214,-3.107,3.3292;-.7319,-4.5789,1.4384;-.0872,-2.2785,1.0841;-.0985,-2.065,2.4584;-.7366,-4.3654,2.8155;-.9509,-5.5748,1.0422;.1445,-1.4325,.4354;.1548,-1.0702,2.8353;-.9665,-5.1946,3.4898;-.4192,-2.9428,4.4107;1.2431,-1.6888,-3.938;1.4386,-1.307,-3.0363;.37,3.6529,-1.2058;-2.1619,-2.9016,-1.6879;-2.9373,-3.1224,-.5454;-3.0915,-2.295,.436;-3.8166,-.7499,.7867;-4.8895,-.3505,-.6854;-2.4977,.4931,1.1967;-4.8382,-1.122,2.3108;-3.4453,-4.3342,-.3666;-4.1709,-4.6141,.8203;-4.3078,-.1946,-1.607;-5.4462,.586,-.5024;-5.6214,-1.1566,-.8694;-1.6775,.5985,.4715;-2.0345,.2478,2.1647;-2.9899,1.477,1.2973;-5.2861,-.1911,2.7043;-5.6595,-1.8298,2.1045;-4.2008,-1.5514,3.1031;-5.0995,-4.0209,.8559;-3.5623,-4.4051,1.7132;-4.4169,-5.6828,.7673;4.3114,-2.1914,-.1458;4.1372,-3.257,-1.0402;3.464,-4.4108,-.6571;2.9757,-4.4956,.6416;3.1542,-3.4689,1.5641;3.8138,-2.3147,1.1604;4.4916,-3.1605,-2.0697;3.295,-5.2255,-1.3622;2.2169,-5.6816,1.0421;2.7513,-3.5726,2.5725;3.93,-1.4885,1.8639;-.5036,4.0051,-.168;-1.8651,3.7484,-.2598;-2.3503,3.131,-1.4088;-1.5162,2.8014,-2.4734;-.1573,3.0674,-2.3666;-.0994,4.4392,.7499;-2.5458,3.9929,.5563;-3.771,2.7788,-1.4806;-1.933,2.3265,-3.3617;.5086,2.7894,-3.1847;2.1162,-5.9192,2.2247;1.7155,-6.3563,.1616;-4.1875,2.3132,-2.5146;-4.447,2.9448,-.4772;6.7231,.1778,-1.8963;6.0358,1.4215,-1.7846;7.9337,.1118,-2.6398;8.4313,1.2209,-3.2776;8.4569,-.8472,-2.7046;9.3607,1.158,-3.8505;6.5601,2.5431,-2.4868;7.7249,2.4457,-3.2095;6.022,3.4925,-2.455;8.1059,3.3216,-3.7422;4.5712,3.9258,-.2461;3.7331,5.0726,-.1209;5.8977,4.0059,.2639;6.3776,5.1714,.8116;6.539,3.1233,.224;7.4001,5.2068,1.198;4.2632,6.2688,.4369;5.5588,6.3238,.8872;3.6118,7.1451,.5121;5.9548,7.2476,1.318;-2.4086,-3.7899,-2.8912;-2.5913,-4.8397,-2.6143;-3.2903,-3.4308,-3.4553;-1.5464,-3.7558,-3.5755;-1.7141,-1.5018,-2.011;-2.4699,-.9749,-2.6218;-1.5005,-.8943,-1.119;-.7909,-1.5312,-2.6126;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662524937941</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.020280298300 0.001387607752 0.023365692823 0.005337476754</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.039601679 -0.006514621 0.000096044 0.000179768 0.000251901 0.000283674 0.000327473 0.000391644 0.000427326 0.000508986 0.000640860 0.000762079 0.000784872 0.000836059 0.000912912 0.001016248 0.001046826 0.001180469 0.001244207 0.001291055 0.001418880 0.001424179 0.001503832 0.001599779 0.001756219 0.001872076 0.001969858 0.002188590 0.002714208 0.003023192 0.003257605 0.003475355 0.003948707 0.004244085 0.004503028 0.004788525 0.004859103 0.005463638 0.005629469 0.006054320 0.006637363 0.006873033 0.007309918 0.007774844 0.007921643 0.008346300 0.008719797 0.009290624 0.009778438 0.010159466 0.010354258 0.012514081 0.012765235 0.013332564 0.014259689 0.014592355 0.014790315 0.015299465 0.015781391 0.015987928 0.016383183 0.017027279 0.017122525 0.018156455 0.018657512 0.020251541 0.020950855 0.021325251 0.022207752 0.023030871 0.023268757 0.024510102 0.025631940 0.025940068 0.026490808 0.026718907 0.027441781 0.027765718 0.029948465 0.030428206 0.031972846 0.032390058 0.032850959 0.035757849 0.037902843 0.038793604 0.039239884 0.039426025 0.040335369 0.040930967 0.042156400 0.045258689 0.046005037 0.046159287 0.049669103 0.050667469 0.051358590 0.051568360 0.051799104 0.052281495 0.052386474 0.052520324 0.052641091 0.053824683 0.054387370 0.054850705 0.056493338 0.056841546 0.056978995 0.057268652 0.057636464 0.058502228 0.059220622 0.059985296 0.060442748 0.061097992 0.061450897 0.061734886 0.064556690 0.064704652 0.065550113 0.067711957 0.068142262 0.069405894 0.071791065 0.072658374 0.076458597 0.077853381 0.080242052 0.081246844 0.082198270 0.086916349 0.089475372 0.090812873 0.092836670 0.093094825 0.094197886 0.095237285 0.095328920 0.096253991 0.096490866 0.097076242 0.098446866 0.099436871 0.099836677 0.101211729 0.102239264 0.102599332 0.103524843 0.103805984 0.104242955 0.106589556 0.107770377 0.108199048 0.108706445 0.110148771 0.112534636 0.113253372 0.115956234 0.116451327 0.117273520 0.119292070 0.122943429 0.126102821 0.127249990 0.127958547 0.128977801 0.129934589 0.133089292 0.135132175 0.136674933 0.142057060 0.142977776 0.144560200 0.145724060 0.146696456 0.152498050 0.152501946 0.157268016 0.159557598 0.170032590 0.171790539 0.174035860 0.175503643 0.180431636 0.183211877 0.185359473 0.188001301 0.188237288 0.193709111 0.201723976 0.204263893 0.204724132 0.206760562 0.207140991 0.209015526 0.210116458 0.210809957 0.212466078 0.215241735 0.216704781 0.224760545 0.231479925 0.232525990 0.233251380 0.234978727 0.244285592 0.248014859 0.254368807 0.255010115 0.256682038 0.258796207 0.271367396 0.276859060 0.289736487 0.295778036 0.297378206 0.299334945 0.304106638 0.305978001 0.307523207 0.311429951 0.320381862 0.322293915 0.324726500 0.328382315 0.345540535 0.349111374 0.350597820 0.354675605 0.358799020 0.360966149 0.363928126 0.369403240 0.380963179 0.389269615 0.405025927 0.425874287 0.430056355 0.444348905 0.463001212 0.463195638 0.475181490 0.475698331 0.477887479 0.482293162 0.498022487 0.508258302 0.541811322 0.563784780 0.566752580 0.574782674 0.583255536 0.604249183 0.623509183 0.639369677 0.643304781 0.665291100 0.671086583 0.681210969 0.681291111 0.689926404 0.691581510 0.704240286 0.704927087 0.712089554 0.714075916 0.737180203 0.750679369 0.771573159 0.775833958 0.797945422 0.812266184 0.815717711 0.818581796 0.820216127 0.821423548 0.825585517 0.829613824 0.830903278 0.840505013 0.844419764 0.846849610 0.848658481 0.856394012 0.859234497 0.867337015 0.872025718 0.875266338 0.886522431 0.887716094 0.893642426 0.910740064 0.915317702 0.923909187 0.930955744 0.933822357 0.956153358 0.958355095 0.969159564 0.975840063 0.989132077 0.999613718 1.012940517 1.034016785 1.042608237 1.049153548 1.055213098 1.072916473 1.084184170 1.088644143 1.109990428 1.110584918 1.116108153 1.122411587 1.123318208 1.134013633 1.142235054 1.161148486 1.168711544 1.172572834 1.173198670 1.200383631 1.203836089 1.214676303 1.247259752 1.291266776 1.295449468 1.299948542 1.314409706 1.326249765 1.326688067 1.330137481 1.334420606 1.340914444 1.345758557 1.358369484 1.362024300 1.378766355 1.380862194 1.381212859 1.383715320 1.557370982 1.671835716 1.710310261</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">43</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96950475" y3="-0.94878069" z3="-0.62472759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.68158438" y3="-1.94111139" z3="-1.43581265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.16002367" y3="-0.987027" z3="-1.31181166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82807384" y3="1.48269408" z3="-1.01204304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32881803" y3="0.31432846" z3="-0.46174148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.70035379" y3="2.71623896" z3="-1.20116028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03625988" y3="2.7348262" z3="-0.84041177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36850985" y3="4.98768206" z3="-0.49404319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.83043151" y3="3.82690906" z3="-0.99762221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72714537" y3="5.86204426" z3="-0.3458668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.16891466" y3="1.57453968" z3="-1.72508565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14626382" y3="0.35276727" z3="0.21936387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75938566" y3="0.36234936" z3="-0.6806216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6262225" y3="0.72174726" z3="0.20841595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.73834412" y3="-0.8870307" z3="-1.5330832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08230761" y3="-2.46568636" z3="-1.35528458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83735932" y3="-5.41932698" z3="-6.37373666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60332584" y3="-4.99468861" z3="-5.39332462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98468444" y3="-3.87975825" z3="-2.90342856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58322566" y3="-3.61542949" z3="-5.22924889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.34495749" y3="-5.83242358" z3="-4.30582928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0498454" y3="-5.26899819" z3="-3.07027228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28348725" y3="-3.02722555" z3="-3.99079883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79330907" y3="-2.9397815" z3="-6.06207211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.38630767" y3="-6.91918415" z3="-4.41412971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.88342799" y3="-5.91056318" z3="-2.20069048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61422015" y3="-3.34316843" z3="-1.64410225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3878996" y3="-3.81570761" z3="-0.89212285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.74713571" y3="-4.8115118" z3="-1.1677791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39400917" y3="-3.53789001" z3="0.56301037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41616198" y3="-3.10021573" z3="3.32895157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72576342" y3="-4.57675473" z3="1.44151379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0881958" y3="-2.27572242" z3="1.08159552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.0975163" y3="-2.05930552" z3="2.45554328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72865352" y3="-4.36053316" z3="2.81828035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.94273416" y3="-5.57415151" z3="1.04784539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14029086" y3="-1.43061723" z3="0.43051364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15365619" y3="-1.06302162" z3="2.82985349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.95503283" y3="-5.18911079" z3="3.49470477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41254555" y3="-2.93381787" z3="4.41015181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24250314" y3="-1.69092082" z3="-3.93895214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43706747" y3="-1.30800081" z3="-3.03756358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36898017" y3="3.65668703" z3="-1.20081645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15707969" y3="-2.91034761" z3="-1.68597964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93632481" y3="-3.1267826" z3="-0.54367072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09343152" y3="-2.29784173" z3="0.43506028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8191833" y3="-0.74921583" z3="0.7820583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.88264125" y3="-0.34510203" z3="-0.69519678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50110212" y3="0.4896159" z3="1.1985003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.84875009" y3="-1.120799" z3="2.29809921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44327076" y3="-4.33623923" z3="-0.3646398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.16574838" y3="-4.61707447" z3="0.82512781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.28646416" y3="-0.18371204" z3="-1.61175254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.44241485" y3="0.58841554" z3="-0.50951422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.61305661" y3="-1.15156127" z3="-0.89247364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.66313768" y3="0.58717927" z3="0.4822887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.05044444" y3="0.24542029" z3="2.17641707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98936358" y3="1.4776894" z3="1.28925879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.29674108" y3="-0.19135997" z3="2.69210214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.6714054" y3="-1.82617648" z3="2.08312759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.21782063" y3="-1.55377124" z3="3.09454965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09577301" y3="-4.02583936" z3="0.86101896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55454957" y3="-4.40399102" z3="1.71621678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40893756" y3="-5.68717178" z3="0.7756708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.30873909" y3="-2.19199441" z3="-0.14777831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1368122" y3="-3.25898785" z3="-1.04104787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46543554" y3="-4.41351374" z3="-0.65686324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9766338" y3="-4.49762044" z3="0.64165861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15261427" y3="-3.4693666" z3="1.56288198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81037832" y3="-2.31445555" z3="1.15818937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49177675" y3="-3.16325437" z3="-2.07039809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.29836055" y3="-5.22930354" z3="-1.36104911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.21996235" y3="-5.68447368" z3="1.04324145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74920994" y3="-3.57237788" z3="2.57123701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.92468914" y3="-1.48721513" z3="1.86066369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50281253" y3="4.00896432" z3="-0.16148585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86436897" y3="3.75302552" z3="-0.25061841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.34996422" y3="3.13356682" z3="-1.39569462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.51947605" y3="2.80880061" z3="-2.46614059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.16042724" y3="3.07408027" z3="-2.36202746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.09708782" y3="4.44096164" z3="0.75648949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54464315" y3="3.99888026" z3="0.56479489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.7714198" y3="2.78641616" z3="-1.46706578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.93909366" y3="2.33886516" z3="-3.35683957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.50380543" y3="2.79682714" z3="-3.18194888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.11996326" y3="-5.92143846" z3="2.22612585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.71936437" y3="-6.36066592" z3="0.16337027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.19848698" y3="2.33378003" z3="-2.51256699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45108563" y3="2.96812265" z3="-0.48225231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.71960946" y3="0.17701431" z3="-1.8996731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.03289061" y3="1.42099462" z3="-1.78712745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.92990348" y3="0.11080397" z3="-2.64373969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.42758518" y3="1.21995032" z3="-3.2813797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.45266922" y3="-0.84839323" z3="-2.70918601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.35661984" y3="1.15685436" z3="-3.85473506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55730365" y3="2.54262865" z3="-2.48913961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.72177281" y3="2.44504612" z3="-3.21243016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01960427" y3="3.49221197" z3="-2.45661196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.10285957" y3="3.32098062" z3="-3.7450114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57142803" y3="3.92471014" z3="-0.24525811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7341777" y3="5.07185492" z3="-0.1175209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89851682" y3="4.00326371" z3="0.26327622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.37980131" y3="5.16766342" z3="0.81215168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53927312" y3="3.12034348" z3="0.2212333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.40281653" y3="5.20185263" z3="1.19738795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.26566506" y3="6.26695698" z3="0.44140725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.56177201" y3="6.32038267" z3="0.89040529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.61490037" y3="7.14345592" z3="0.51870117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.95886896" y3="7.24325646" z3="1.32225091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40655072" y3="-3.79909003" z3="-2.88844768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.58739068" y3="-4.84828436" z3="-2.61037242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28931987" y3="-3.44228316" z3="-3.45163402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54544722" y3="-3.76474329" z3="-3.57454707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71617114" y3="-1.50789923" z3="-2.01564179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47109965" y3="-0.98885273" z3="-2.63734764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51171703" y3="-0.89228424" z3="-1.125393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7880604" y3="-1.53803423" z3="-2.61036119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9695,-.9488,-.6247;6.6816,-1.9411,-1.4358;6.16,-.987,-1.3118;4.8281,1.4827,-1.012;4.3288,.3143,-.4617;2.7004,2.7162,-1.2012;4.0363,2.7348,-.8404;2.3685,4.9877,-.494;1.8304,3.8269,-.9976;1.7271,5.862,-.3459;2.1689,1.5745,-1.7251;3.1463,.3528,.2194;1.7594,.3623,-.6806;.6262,.7217,.2084;1.7383,-.887,-1.5331;1.0823,-2.4657,-1.3553;1.8374,-5.4193,-6.3737;1.6033,-4.9947,-5.3933;.9847,-3.8798,-2.9034;1.5832,-3.6154,-5.2292;1.345,-5.8324,-4.3058;1.0498,-5.269,-3.0703;1.2835,-3.0272,-3.9908;1.7933,-2.9398,-6.0621;1.3863,-6.9192,-4.4141;.8834,-5.9106,-2.2007;.6142,-3.3432,-1.6441;-.3879,-3.8157,-.8921;-.7471,-4.8115,-1.1678;-.394,-3.5379,.563;-.4162,-3.1002,3.329;-.7258,-4.5768,1.4415;-.0882,-2.2757,1.0816;-.0975,-2.0593,2.4555;-.7287,-4.3605,2.8183;-.9427,-5.5742,1.0478;.1403,-1.4306,.4305;.1537,-1.063,2.8299;-.955,-5.1891,3.4947;-.4125,-2.9338,4.4102;1.2425,-1.6909,-3.939;1.4371,-1.308,-3.0376;.369,3.6567,-1.2008;-2.1571,-2.9103,-1.686;-2.9363,-3.1268,-.5437;-3.0934,-2.2978,.4351;-3.8192,-.7492,.7821;-4.8826,-.3451,-.6952;-2.5011,.4896,1.1985;-4.8488,-1.1208,2.2981;-3.4433,-4.3362,-.3646;-4.1657,-4.6171,.8251;-4.2865,-.1837,-1.6118;-5.4424,.5884,-.5095;-5.6131,-1.1516,-.8925;-1.6631,.5872,.4823;-2.0504,.2454,2.1764;-2.9894,1.4777,1.2893;-5.2967,-.1914,2.6921;-5.6714,-1.8262,2.0831;-4.2178,-1.5538,3.0945;-5.0958,-4.0258,.861;-3.5545,-4.404,1.7162;-4.4089,-5.6872,.7757;4.3087,-2.192,-.1478;4.1368,-3.259,-1.041;3.4654,-4.4135,-.6569;2.9766,-4.4976,.6417;3.1526,-3.4694,1.5629;3.8104,-2.3145,1.1582;4.4918,-3.1633,-2.0704;3.2984,-5.2293,-1.361;2.22,-5.6845,1.0432;2.7492,-3.5724,2.5712;3.9247,-1.4872,1.8607;-.5028,4.009,-.1615;-1.8644,3.753,-.2506;-2.35,3.1336,-1.3957;-1.5195,2.8088,-2.4661;-.1604,3.0741,-2.362;-.0971,4.441,.7565;-2.5446,3.9989,.5648;-3.7714,2.7864,-1.4671;-1.9391,2.3389,-3.3568;.5038,2.7968,-3.1819;2.12,-5.9214,2.2261;1.7194,-6.3607,.1634;-4.1985,2.3338,-2.5126;-4.4511,2.9681,-.4823;6.7196,.177,-1.8997;6.0329,1.421,-1.7871;7.9299,.1108,-2.6437;8.4276,1.22,-3.2814;8.4527,-.8484,-2.7092;9.3566,1.1569,-3.8547;6.5573,2.5426,-2.4891;7.7218,2.445,-3.2124;6.0196,3.4922,-2.4566;8.1029,3.321,-3.745;4.5714,3.9247,-.2453;3.7342,5.0719,-.1175;5.8985,4.0033,.2633;6.3798,5.1677,.8122;6.5393,3.1203,.2212;7.4028,5.2019,1.1974;4.2657,6.267,.4414;5.5618,6.3204,.8904;3.6149,7.1435,.5187;5.9589,7.2433,1.3223;-2.4066,-3.7991,-2.8884;-2.5874,-4.8483,-2.6104;-3.2893,-3.4423,-3.4516;-1.5454,-3.7647,-3.5745;-1.7162,-1.5079,-2.0156;-2.4711,-.9889,-2.6373;-1.5117,-.8923,-1.1254;-.7881,-1.538,-2.6104;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662524412513</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.024064525049 0.001610567535 0.024891910586 0.005337708497</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.040086915 -0.007926273 0.000095700 0.000179679 0.000251934 0.000283666 0.000327918 0.000392109 0.000427542 0.000515168 0.000641953 0.000762856 0.000791866 0.000836467 0.000912853 0.001016238 0.001075694 0.001184262 0.001246421 0.001291179 0.001420407 0.001430256 0.001503890 0.001599884 0.001756330 0.001878727 0.001970977 0.002192353 0.002714434 0.003023220 0.003277168 0.003541168 0.003948808 0.004266859 0.004504280 0.004817847 0.004890757 0.005511397 0.005634726 0.006104160 0.006669193 0.006893187 0.007344407 0.007775168 0.007935919 0.008347356 0.008719769 0.009302713 0.009800488 0.010167243 0.010372316 0.012517599 0.012784228 0.013347941 0.014287483 0.014594853 0.014813283 0.015317563 0.015784786 0.016014086 0.016385967 0.017072983 0.017395498 0.018237943 0.018681101 0.020279363 0.020945023 0.021345192 0.022207712 0.023035159 0.023334947 0.024533378 0.025641522 0.025953735 0.026494161 0.026729165 0.027761499 0.028150585 0.029965664 0.030428802 0.031976622 0.032387116 0.032850215 0.035842104 0.038093670 0.039062000 0.039264387 0.039479980 0.040346784 0.040930728 0.042235892 0.045258947 0.046016311 0.046159088 0.049669168 0.050667593 0.051366916 0.051571033 0.051799467 0.052281680 0.052387588 0.052535263 0.052908465 0.053834489 0.054366610 0.054852462 0.056493422 0.056841983 0.056979662 0.057268833 0.057636196 0.058504733 0.059220568 0.060011067 0.060443452 0.061147713 0.061468534 0.061740768 0.064556724 0.064728263 0.065553032 0.067716338 0.068145446 0.069405873 0.071814538 0.072661355 0.076461133 0.078028425 0.080271333 0.081261558 0.082226467 0.087061506 0.089477995 0.090814329 0.092837228 0.093207105 0.094199330 0.095250099 0.095333057 0.096348193 0.096490928 0.097152577 0.098448592 0.099440246 0.099915689 0.101217687 0.102310133 0.102600516 0.103535134 0.103811905 0.104256952 0.106621353 0.107858027 0.108198866 0.108753768 0.110176559 0.112534916 0.113264796 0.115956490 0.116460658 0.117288642 0.119294237 0.122943230 0.126102926 0.127302891 0.127980605 0.129147936 0.129933350 0.133090303 0.135140498 0.136674532 0.142090146 0.143029319 0.144567850 0.145724994 0.146697344 0.152500740 0.152626619 0.157278825 0.159568337 0.170250030 0.172218284 0.174119904 0.175651902 0.180445733 0.183220626 0.185440434 0.188002819 0.188302695 0.193745276 0.201724003 0.204448423 0.204803645 0.206766370 0.207143865 0.209030108 0.210290219 0.210878426 0.212568984 0.215347296 0.216733750 0.224780263 0.231485442 0.232555178 0.233376202 0.235013776 0.244369764 0.248020822 0.254412503 0.255014581 0.256689932 0.258801238 0.271367373 0.277081839 0.289875887 0.295963624 0.297377892 0.299336226 0.304111174 0.306039285 0.307523519 0.311438286 0.320480614 0.322518251 0.324730261 0.328545273 0.345544872 0.349136002 0.350615389 0.354688633 0.358809440 0.363756234 0.368694134 0.370569955 0.381205444 0.389679621 0.405072744 0.425938568 0.430063629 0.444351070 0.463043592 0.463328596 0.475181725 0.476578858 0.477889223 0.482299765 0.498022639 0.508475786 0.541859758 0.563884200 0.566752556 0.575143119 0.583257559 0.604249414 0.623519875 0.639753544 0.643336657 0.665297834 0.671115041 0.681230983 0.681294943 0.689947178 0.691582098 0.704240457 0.705006071 0.712365624 0.714075813 0.737183413 0.750679478 0.771573191 0.775834117 0.797945181 0.812496807 0.815719506 0.818651945 0.820240792 0.821548809 0.825939919 0.829681146 0.830905050 0.840505239 0.844499690 0.846952658 0.848658483 0.856410779 0.859258816 0.867337029 0.872025767 0.875442954 0.886529783 0.887717528 0.893642945 0.911044569 0.915453643 0.923909900 0.930958555 0.933847437 0.956444326 0.958358559 0.969161852 0.975841643 0.989140548 0.999614672 1.012940593 1.034019234 1.042608311 1.049153640 1.055213761 1.072916756 1.084185596 1.088646056 1.109990496 1.110585049 1.116110701 1.122411586 1.123318264 1.134024938 1.142283117 1.161150644 1.168716982 1.172574000 1.173205666 1.200389006 1.203935969 1.214730646 1.247260488 1.291270762 1.295499587 1.300240671 1.314409696 1.326262140 1.326736267 1.330137423 1.334420659 1.340915121 1.345759240 1.359266173 1.362027921 1.378768992 1.380873764 1.381248944 1.384187321 1.557373103 1.671839052 1.730461398</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">44</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96630491" y3="-0.9492628" z3="-0.62738759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.67782165" y3="-1.94186711" z3="-1.43939552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.15647214" y3="-0.9877078" z3="-1.31512076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.8256771" y3="1.4823648" z3="-1.01389108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32614757" y3="0.31402504" z3="-0.46381213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69872096" y3="2.71774152" z3="-1.20003539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03496973" y3="2.73492168" z3="-0.8405725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36930355" y3="4.98843924" z3="-0.48947094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82980928" y3="3.82872488" z3="-0.99402384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72871086" y3="5.86305606" z3="-0.33936447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.16606069" y3="1.57690549" z3="-1.72491644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14392138" y3="0.35276423" z3="0.21787737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7567173" y3="0.36387924" z3="-0.68157662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62408173" y3="0.72275037" z3="0.20828916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.73485239" y3="-0.88512684" z3="-1.53488976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08262366" y3="-2.46540844" z3="-1.35536349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83963506" y3="-5.42300669" z3="-6.37145927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60551801" y3="-4.99769801" z3="-5.39134368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98611333" y3="-3.88118781" z3="-2.90281129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.5841816" y3="-3.61834817" z3="-5.22859436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.3482634" y3="-5.83478758" z3="-4.3030249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.05267039" y3="-5.27055609" z3="-3.0680012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28418854" y3="-3.02916236" z3="-3.99059035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.7934803" y3="-2.94324539" z3="-6.06201737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.3906528" y3="-6.92159118" z3="-4.41041578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.88715048" y3="-5.91157723" z3="-2.19785406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61457501" y3="-3.34312362" z3="-1.64412197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.38197912" y3="-3.82022354" z3="-0.88853676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.74388571" y3="-4.81372708" z3="-1.16544618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39104288" y3="-3.53716982" z3="0.56442168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41108174" y3="-3.09383075" z3="3.3288372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71965716" y3="-4.5749274" z3="1.44481706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08871885" y3="-2.27265388" z3="1.07977183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09676674" y3="-2.05356356" z3="2.45312429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72114458" y3="-4.35588378" z3="2.82105092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93460638" y3="-5.57345752" z3="1.05323322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13609087" y3="-1.42816213" z3="0.42653963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15217456" y3="-1.05583075" z3="2.82487745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94444874" y3="-5.18357329" z3="3.49935597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40656889" y3="-2.92524105" z3="4.40964903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2422756" y3="-1.69309788" z3="-3.93994083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43544825" y3="-1.30868743" z3="-3.03880207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36792134" y3="3.66008001" z3="-1.19570623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1624" y3="-2.91223486" z3="-1.68877294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9361383" y3="-3.12970323" z3="-0.54437645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09262814" y3="-2.29983279" z3="0.43440662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81715299" y3="-0.75044073" z3="0.77476371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.87075588" y3="-0.34141213" z3="-0.70770431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50000208" y3="0.48707079" z3="1.20105858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.85993502" y3="-1.12021814" z3="2.28444486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44041283" y3="-4.34149594" z3="-0.36028958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.16034694" y3="-4.62002116" z3="0.83069071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.27819122" y3="-0.17276991" z3="-1.6181755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.43647798" y3="0.59109425" z3="-0.52315263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.59926386" y3="-1.14663915" z3="-0.91288832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65359134" y3="0.57480794" z3="0.49400356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.06514312" y3="0.24793045" z3="2.19073279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98985066" y3="1.47823941" z3="1.27643667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.30830009" y3="-0.18883218" z3="2.67592915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.6830763" y3="-1.82160314" z3="2.06403053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.23743399" y3="-1.55727041" z3="3.08803641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09206139" y3="-4.03116423" z3="0.8668762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54874529" y3="-4.40376178" z3="1.72015458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40121034" y3="-5.69045159" z3="0.78369243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.30610599" y3="-2.19248619" z3="-0.1497379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13630103" y3="-3.2608482" z3="-1.04179883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4667042" y3="-4.41602941" z3="-0.6565089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97737717" y3="-4.49938653" z3="0.6418814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15099043" y3="-3.46962943" z3="1.56186197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.80700785" y3="-2.31412965" z3="1.15605882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49178594" y3="-3.16593529" z3="-2.07104487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.30153002" y3="-5.23303831" z3="-1.35974087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22285252" y3="-5.68720711" z3="1.04458585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74720524" y3="-3.57198106" z3="2.57013928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.91938678" y3="-1.48576668" z3="1.85750536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50230986" y3="4.0111967" z3="-0.15472698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86486416" y3="3.75928668" z3="-0.24446839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.35452644" y3="3.14831305" z3="-1.39509133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.52365835" y3="2.81985699" z3="-2.46248828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.16356841" y3="3.08017916" z3="-2.3573012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.09501119" y3="4.44140715" z3="0.76343929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5433586" y3="4.00439548" z3="0.57319372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.77799343" y3="2.8062284" z3="-1.46848625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.94432429" y3="2.35101589" z3="-3.35225099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.49946347" y3="2.80338084" z3="-3.17823304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12367121" y3="-5.92356152" z3="2.22759483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.72294299" y3="-6.36474376" z3="0.16528996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.20083145" y3="2.35702912" z3="-2.50769174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.44921661" y3="2.962488" z3="-0.4573604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.71613095" y3="0.17624835" z3="-1.90304317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.02998372" y3="1.42045394" z3="-1.78969713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.92603825" y3="0.10983772" z3="-2.64772541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.42384192" y3="1.2190484" z3="-3.28515551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.44841059" y3="-0.84952961" z3="-2.71377732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.35258245" y3="1.15581903" z3="-3.85897205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55449494" y3="2.54218834" z3="-2.49146553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.71857148" y3="2.44441794" z3="-3.21535889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01719322" y3="3.49197429" z3="-2.45821827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09978769" y3="3.32041421" z3="-3.74774705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57167612" y3="3.92361273" z3="-0.24443364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73540373" y3="5.07115536" z3="-0.11420674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89937432" y3="4.00047084" z3="0.26274719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38205345" y3="5.16368801" z3="0.81288572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5394775" y3="3.117185" z3="0.21846629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.40551371" y3="5.19658977" z3="1.19703847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.26830243" y3="6.26502993" z3="0.44600862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.56489421" y3="6.31683425" z3="0.89379877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.61824227" y3="7.14186607" z3="0.52531424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.96307375" y3="7.23874662" z3="1.32669237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40613367" y3="-3.80812869" z3="-2.88704878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.58393736" y3="-4.85731239" z3="-2.60508052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28974315" y3="-3.45541482" z3="-3.45171251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54468337" y3="-3.77370922" z3="-3.57236507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71903039" y3="-1.51319077" z3="-2.02048761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47088529" y3="-0.99649542" z3="-2.63927763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5153761" y3="-0.89883936" z3="-1.13363047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79177201" y3="-1.54158536" z3="-2.61346316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9663,-.9493,-.6274;6.6778,-1.9419,-1.4394;6.1565,-.9877,-1.3151;4.8257,1.4824,-1.0139;4.3261,.314,-.4638;2.6987,2.7177,-1.2;4.035,2.7349,-.8406;2.3693,4.9884,-.4895;1.8298,3.8287,-.994;1.7287,5.8631,-.3394;2.1661,1.5769,-1.7249;3.1439,.3528,.2179;1.7567,.3639,-.6816;.6241,.7228,.2083;1.7349,-.8851,-1.5349;1.0826,-2.4654,-1.3554;1.8396,-5.423,-6.3715;1.6055,-4.9977,-5.3913;.9861,-3.8812,-2.9028;1.5842,-3.6183,-5.2286;1.3483,-5.8348,-4.303;1.0527,-5.2706,-3.068;1.2842,-3.0292,-3.9906;1.7935,-2.9432,-6.062;1.3907,-6.9216,-4.4104;.8872,-5.9116,-2.1979;.6146,-3.3431,-1.6441;-.382,-3.8202,-.8885;-.7439,-4.8137,-1.1654;-.391,-3.5372,.5644;-.4111,-3.0938,3.3288;-.7197,-4.5749,1.4448;-.0887,-2.2727,1.0798;-.0968,-2.0536,2.4531;-.7211,-4.3559,2.8211;-.9346,-5.5735,1.0532;.1361,-1.4282,.4265;.1522,-1.0558,2.8249;-.9444,-5.1836,3.4994;-.4066,-2.9252,4.4096;1.2423,-1.6931,-3.9399;1.4354,-1.3087,-3.0388;.3679,3.6601,-1.1957;-2.1624,-2.9122,-1.6888;-2.9361,-3.1297,-.5444;-3.0926,-2.2998,.4344;-3.8172,-.7504,.7748;-4.8708,-.3414,-.7077;-2.5,.4871,1.2011;-4.8599,-1.1202,2.2844;-3.4404,-4.3415,-.3603;-4.1603,-4.62,.8307;-4.2782,-.1728,-1.6182;-5.4365,.5911,-.5232;-5.5993,-1.1466,-.9129;-1.6536,.5748,.494;-2.0651,.2479,2.1907;-2.9899,1.4782,1.2764;-5.3083,-.1888,2.6759;-5.6831,-1.8216,2.064;-4.2374,-1.5573,3.088;-5.0921,-4.0312,.8669;-3.5487,-4.4038,1.7202;-4.4012,-5.6905,.7837;4.3061,-2.1925,-.1497;4.1363,-3.2608,-1.0418;3.4667,-4.416,-.6565;2.9774,-4.4994,.6419;3.151,-3.4696,1.5619;3.807,-2.3141,1.1561;4.4918,-3.1659,-2.071;3.3015,-5.233,-1.3597;2.2229,-5.6872,1.0446;2.7472,-3.572,2.5701;3.9194,-1.4858,1.8575;-.5023,4.0112,-.1547;-1.8649,3.7593,-.2445;-2.3545,3.1483,-1.3951;-1.5237,2.8199,-2.4625;-.1636,3.0802,-2.3573;-.095,4.4414,.7634;-2.5434,4.0044,.5732;-3.778,2.8062,-1.4685;-1.9443,2.351,-3.3523;.4995,2.8034,-3.1782;2.1237,-5.9236,2.2276;1.7229,-6.3647,.1653;-4.2008,2.357,-2.5077;-4.4492,2.9625,-.4574;6.7161,.1762,-1.903;6.03,1.4205,-1.7897;7.926,.1098,-2.6477;8.4238,1.219,-3.2852;8.4484,-.8495,-2.7138;9.3526,1.1558,-3.859;6.5545,2.5422,-2.4915;7.7186,2.4444,-3.2154;6.0172,3.492,-2.4582;8.0998,3.3204,-3.7477;4.5717,3.9236,-.2444;3.7354,5.0712,-.1142;5.8994,4.0005,.2627;6.3821,5.1637,.8129;6.5395,3.1172,.2185;7.4055,5.1966,1.197;4.2683,6.265,.446;5.5649,6.3168,.8938;3.6182,7.1419,.5253;5.9631,7.2387,1.3267;-2.4061,-3.8081,-2.887;-2.5839,-4.8573,-2.6051;-3.2897,-3.4554,-3.4517;-1.5447,-3.7737,-3.5724;-1.719,-1.5132,-2.0205;-2.4709,-.9965,-2.6393;-1.5154,-.8988,-1.1336;-.7918,-1.5416,-2.6135;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662526638807</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.024473167145 0.001686414698 0.019697709768 0.005337231219</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.040614437 -0.008775601 0.000103436 0.000184729 0.000252879 0.000283913 0.000328449 0.000392120 0.000427714 0.000518111 0.000641945 0.000763655 0.000792859 0.000836609 0.000914456 0.001017199 0.001085437 0.001189669 0.001246773 0.001291313 0.001422215 0.001440933 0.001503991 0.001600497 0.001756322 0.001882880 0.001971165 0.002192302 0.002718668 0.003023905 0.003290947 0.003615127 0.003948861 0.004282276 0.004504690 0.004826863 0.004916261 0.005556474 0.005658340 0.006137637 0.006683712 0.006947266 0.007383727 0.007848723 0.007937466 0.008350135 0.008721039 0.009308351 0.009825173 0.010172702 0.010371782 0.012521942 0.012790538 0.013365505 0.014304103 0.014596107 0.014833224 0.015331222 0.015787851 0.016026820 0.016388333 0.017079232 0.017746267 0.018630888 0.018678752 0.020339849 0.021032102 0.022148657 0.022221341 0.023035603 0.023341411 0.024542220 0.025644944 0.025960663 0.026496098 0.026732070 0.027762607 0.029038958 0.030063684 0.030432513 0.031978519 0.032423933 0.032865035 0.035836014 0.038080567 0.039030593 0.039440770 0.039465988 0.040373993 0.040930624 0.042236297 0.045258969 0.046033014 0.046165920 0.049669244 0.050667578 0.051370860 0.051572389 0.051800073 0.052281753 0.052387903 0.052535827 0.053176919 0.053854288 0.054682129 0.055030415 0.056493617 0.056842191 0.056985028 0.057273469 0.057650206 0.058512113 0.059220596 0.060052855 0.060444091 0.061143418 0.061477385 0.061757627 0.064556722 0.064734731 0.065559375 0.067726206 0.068148572 0.069416509 0.071828671 0.072662994 0.076461605 0.078115749 0.080320431 0.081260112 0.082247138 0.087151160 0.089479395 0.090816172 0.092837244 0.093276667 0.094200032 0.095257245 0.095342749 0.096391203 0.096490924 0.097222315 0.098450980 0.099442345 0.099996682 0.101223011 0.102364465 0.102608210 0.103564603 0.103813610 0.104254742 0.106684918 0.107886532 0.108200185 0.108832789 0.110217958 0.112537929 0.113272089 0.115956945 0.116472164 0.117300519 0.119308025 0.122943362 0.126103262 0.127299729 0.128022117 0.129132429 0.129952247 0.133095084 0.135139477 0.136674355 0.142102035 0.143194529 0.144567434 0.145727031 0.146697997 0.152501378 0.152774724 0.157284184 0.159567530 0.170352035 0.172627030 0.174243035 0.175809895 0.180457539 0.183224905 0.185527590 0.188003021 0.188392823 0.193959189 0.201724047 0.204555324 0.204907652 0.206769916 0.207145725 0.209040559 0.210457209 0.210877918 0.212635002 0.215441879 0.216890238 0.224793782 0.231488395 0.232570939 0.233491001 0.235047550 0.244429599 0.248036656 0.254455670 0.255015497 0.256696224 0.258801062 0.271367353 0.277265641 0.289975600 0.296087905 0.297395222 0.299340450 0.304112600 0.306094454 0.307524052 0.311584399 0.320531037 0.322674078 0.324764342 0.328681643 0.345545471 0.349226070 0.350632980 0.354691365 0.358815576 0.363788774 0.369237730 0.378713083 0.383438434 0.389768072 0.405201604 0.426237436 0.430074787 0.444359524 0.463084160 0.463538464 0.475182343 0.477835297 0.477977204 0.482301330 0.498022640 0.508873819 0.541951368 0.564081163 0.566752874 0.575902186 0.583267715 0.604253160 0.624024115 0.639775603 0.643376061 0.665303038 0.671182054 0.681238030 0.681297200 0.690131532 0.691586915 0.704240523 0.705130036 0.712459546 0.714113445 0.737187614 0.750679605 0.771573200 0.775834490 0.797950658 0.812948874 0.815747565 0.818721913 0.820275829 0.821621206 0.826661220 0.829690965 0.830934450 0.840506513 0.844547732 0.847069196 0.848665145 0.856436716 0.859283523 0.867337053 0.872027247 0.875642116 0.886529928 0.887728733 0.893645352 0.911085563 0.915450861 0.923909933 0.930961189 0.933846645 0.956754787 0.958363044 0.969166139 0.975842671 0.989147868 0.999615441 1.012940518 1.034021416 1.042608687 1.049154521 1.055214595 1.072923525 1.084186541 1.088647029 1.109990513 1.110585107 1.116112389 1.122411604 1.123318330 1.134031627 1.142320245 1.161153880 1.168724788 1.172576925 1.173214811 1.200394686 1.204051082 1.214821363 1.247261076 1.291301511 1.295559055 1.300816280 1.314410239 1.326270497 1.326776567 1.330137373 1.334420965 1.340915737 1.345759679 1.360793710 1.362035664 1.378770513 1.380878574 1.381269002 1.384501157 1.557382252 1.671841236 1.752927333</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">45</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96294641" y3="-0.94979178" z3="-0.63028811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.67378219" y3="-1.94261394" z3="-1.44350366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.15267736" y3="-0.98837644" z3="-1.31882081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82309288" y3="1.4820" z3="-1.01590331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3233305" y3="0.31368005" z3="-0.46602785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69682674" y3="2.71926901" z3="-1.19862122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03351753" y3="2.73496616" z3="-0.84067995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37009479" y3="4.98923605" z3="-0.48432992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82906602" y3="3.83065458" z3="-0.98991829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73035223" y3="5.86413452" z3="-0.33226413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.16262123" y3="1.57962377" z3="-1.72447243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14154023" y3="0.35286777" z3="0.2163862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75388542" y3="0.3651995" z3="-0.68238089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62187988" y3="0.72363655" z3="0.20860393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.73121331" y3="-0.88277168" z3="-1.53675737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08197238" y3="-2.46541653" z3="-1.35603559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84272695" y3="-5.42695278" z3="-6.36910616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60822682" y3="-5.00097834" z3="-5.38939982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98775915" y3="-3.88273432" z3="-2.90152387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58558511" y3="-3.62147817" z3="-5.2278053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35172061" y3="-5.83726029" z3="-4.30034549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.05563147" y3="-5.27214249" z3="-3.06584032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28497423" y3="-3.03155192" z3="-3.99035108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79426581" y3="-2.94694296" z3="-6.06185854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.39522417" y3="-6.92414524" z3="-4.4066383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.89063196" y3="-5.91249981" z3="-2.19510859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61623356" y3="-3.34471901" z3="-1.64310632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.38403806" y3="-3.8186163" z3="-0.88959938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.74044588" y3="-4.81626276" z3="-1.16218002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38998537" y3="-3.53559011" z3="0.56452873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40635365" y3="-3.0872801" z3="3.32878905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71355602" y3="-4.5728901" z3="1.44790256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09002994" y3="-2.26968682" z3="1.07736932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09643216" y3="-2.04777921" z3="2.4503849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7134439" y3="-4.35125503" z3="2.82389141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92608233" y3="-5.57306557" z3="1.05875963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13217108" y3="-1.42613597" z3="0.42253722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15029028" y3="-1.04854011" z3="2.81967129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93316219" y3="-5.17843271" z3="3.5042098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40050238" y3="-2.91672884" z3="4.40933053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2418733" y3="-1.69526" z3="-3.94103427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43399037" y3="-1.30974088" z3="-3.04027142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36676169" y3="3.66415662" z3="-1.19031331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15690344" y3="-2.9214439" z3="-1.68691385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93476665" y3="-3.13492154" z3="-0.54319208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09689935" y3="-2.29880097" z3="0.42871115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81883841" y3="-0.74961198" z3="0.76980324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.86225566" y3="-0.33594776" z3="-0.72056232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50064671" y3="0.48405255" z3="1.20456411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.87328902" y3="-1.11936626" z3="2.27176155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43443916" y3="-4.34750605" z3="-0.35475942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15465842" y3="-4.62375972" z3="0.8367491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.26157302" y3="-0.16355713" z3="-1.62787849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.42789045" y3="0.59392024" z3="-0.53316262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.58556094" y3="-1.14297903" z3="-0.93113715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65824229" y3="0.57416923" z3="0.50377689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.06980282" y3="0.24715393" z3="2.18732854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98440545" y3="1.47199065" z3="1.28065359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.32004561" y3="-0.18573717" z3="2.66003687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.69656243" y3="-1.81854603" z3="2.04576981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.25536143" y3="-1.55741292" z3="3.07319458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0858922" y3="-4.03513101" z3="0.87205845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5434625" y3="-4.40543196" z3="1.72559906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39464087" y3="-5.69401191" z3="0.79155969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.30336788" y3="-2.19302386" z3="-0.15187295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13572171" y3="-3.26278889" z3="-1.04268017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46788489" y3="-4.41861265" z3="-0.65625405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97811138" y3="-4.50117915" z3="0.64198808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1492884" y3="-3.46984662" z3="1.5606879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.80353285" y3="-2.31373901" z3="1.15375969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49163309" y3="-3.1686939" z3="-2.07185577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.30447645" y3="-5.23677886" z3="-1.35854605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2256474" y3="-5.68988855" z3="1.04584604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74509672" y3="-3.57149261" z3="2.56888384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.91395463" y3="-1.48418571" z3="1.8541156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50171581" y3="4.01525191" z3="-0.14784371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86455236" y3="3.76548265" z3="-0.23580605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.35534793" y3="3.15452053" z3="-1.38370201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.52764509" y3="2.82953107" z3="-2.45609869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.16706128" y3="3.0877485" z3="-2.3526642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.09250936" y3="4.44211101" z3="0.77121266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54205382" y3="4.01000751" z3="0.58266316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.77796463" y3="2.81340197" z3="-1.45263659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.95039039" y3="2.36430405" z3="-3.34746737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.49467791" y3="2.81074055" z3="-3.17451967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12734038" y3="-5.92553392" z3="2.22911238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.72647417" y3="-6.36890924" z3="0.16734126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.20962298" y3="2.37652097" z3="-2.50195505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45274362" y3="2.98218571" z3="-0.46100909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.71234753" y3="0.17550689" z3="-1.90685063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.02680253" y3="1.41994098" z3="-1.79256678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.92178304" y3="0.10892769" z3="-2.65228315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.41966957" y3="1.21823541" z3="-3.28948278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.44374134" y3="-0.85061752" z3="-2.71906367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.34806135" y3="1.15489293" z3="-3.8638493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.55135268" y3="2.54180266" z3="-2.49407982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.71496447" y3="2.44388053" z3="-3.21869811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01445435" y3="3.49179584" z3="-2.46002659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09625946" y3="3.31996436" z3="-3.75088289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57190472" y3="3.9223836" z3="-0.24352607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73670012" y3="5.07038407" z3="-0.11057746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90029159" y3="3.99739873" z3="0.26216568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38449931" y3="5.15933618" z3="0.81365627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53967118" y3="3.11370141" z3="0.21547535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.40843489" y3="5.19082329" z3="1.19667715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2711855" y3="6.26295897" z3="0.45090888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.56830862" y3="6.31298757" z3="0.89738283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.62192037" y3="7.14019974" z3="0.53233619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.96768933" y3="7.23386894" z3="1.33137097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40390449" y3="-3.81769659" z3="-2.88437624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57956462" y3="-4.86639638" z3="-2.59988658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28922359" y3="-3.46832928" z3="-3.4488427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54358203" y3="-3.78335504" z3="-3.57135437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72055095" y3="-1.51981171" z3="-2.02344962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47407696" y3="-1.01085846" z3="-2.65705432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52691375" y3="-0.89437594" z3="-1.13656074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78785982" y3="-1.54892149" z3="-2.61113943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9629,-.9498,-.6303;6.6738,-1.9426,-1.4435;6.1527,-.9884,-1.3188;4.8231,1.482,-1.0159;4.3233,.3137,-.466;2.6968,2.7193,-1.1986;4.0335,2.735,-.8407;2.3701,4.9892,-.4843;1.8291,3.8307,-.9899;1.7304,5.8641,-.3323;2.1626,1.5796,-1.7245;3.1415,.3529,.2164;1.7539,.3652,-.6824;.6219,.7236,.2086;1.7312,-.8828,-1.5368;1.082,-2.4654,-1.356;1.8427,-5.427,-6.3691;1.6082,-5.001,-5.3894;.9878,-3.8827,-2.9015;1.5856,-3.6215,-5.2278;1.3517,-5.8373,-4.3003;1.0556,-5.2721,-3.0658;1.285,-3.0316,-3.9904;1.7943,-2.9469,-6.0619;1.3952,-6.9241,-4.4066;.8906,-5.9125,-2.1951;.6162,-3.3447,-1.6431;-.384,-3.8186,-.8896;-.7404,-4.8163,-1.1622;-.39,-3.5356,.5645;-.4064,-3.0873,3.3288;-.7136,-4.5729,1.4479;-.09,-2.2697,1.0774;-.0964,-2.0478,2.4504;-.7134,-4.3513,2.8239;-.9261,-5.5731,1.0588;.1322,-1.4261,.4225;.1503,-1.0485,2.8197;-.9332,-5.1784,3.5042;-.4005,-2.9167,4.4093;1.2419,-1.6953,-3.941;1.434,-1.3097,-3.0403;.3668,3.6642,-1.1903;-2.1569,-2.9214,-1.6869;-2.9348,-3.1349,-.5432;-3.0969,-2.2988,.4287;-3.8188,-.7496,.7698;-4.8623,-.3359,-.7206;-2.5006,.4841,1.2046;-4.8733,-1.1194,2.2718;-3.4344,-4.3475,-.3548;-4.1547,-4.6238,.8367;-4.2616,-.1636,-1.6279;-5.4279,.5939,-.5332;-5.5856,-1.143,-.9311;-1.6582,.5742,.5038;-2.0698,.2472,2.1873;-2.9844,1.472,1.2807;-5.32,-.1857,2.66;-5.6966,-1.8185,2.0458;-4.2554,-1.5574,3.0732;-5.0859,-4.0351,.8721;-3.5435,-4.4054,1.7256;-4.3946,-5.694,.7916;4.3034,-2.193,-.1519;4.1357,-3.2628,-1.0427;3.4679,-4.4186,-.6563;2.9781,-4.5012,.642;3.1493,-3.4698,1.5607;3.8035,-2.3137,1.1538;4.4916,-3.1687,-2.0719;3.3045,-5.2368,-1.3585;2.2256,-5.6899,1.0458;2.7451,-3.5715,2.5689;3.914,-1.4842,1.8541;-.5017,4.0153,-.1478;-1.8646,3.7655,-.2358;-2.3553,3.1545,-1.3837;-1.5276,2.8295,-2.4561;-.1671,3.0877,-2.3527;-.0925,4.4421,.7712;-2.5421,4.01,.5827;-3.778,2.8134,-1.4526;-1.9504,2.3643,-3.3475;.4947,2.8107,-3.1745;2.1273,-5.9255,2.2291;1.7265,-6.3689,.1673;-4.2096,2.3765,-2.502;-4.4527,2.9822,-.461;6.7123,.1755,-1.9069;6.0268,1.4199,-1.7926;7.9218,.1089,-2.6523;8.4197,1.2182,-3.2895;8.4437,-.8506,-2.7191;9.3481,1.1549,-3.8638;6.5514,2.5418,-2.4941;7.715,2.4439,-3.2187;6.0145,3.4918,-2.46;8.0963,3.32,-3.7509;4.5719,3.9224,-.2435;3.7367,5.0704,-.1106;5.9003,3.9974,.2622;6.3845,5.1593,.8137;6.5397,3.1137,.2155;7.4084,5.1908,1.1967;4.2712,6.263,.4509;5.5683,6.313,.8974;3.6219,7.1402,.5323;5.9677,7.2339,1.3314;-2.4039,-3.8177,-2.8844;-2.5796,-4.8664,-2.5999;-3.2892,-3.4683,-3.4488;-1.5436,-3.7834,-3.5714;-1.7206,-1.5198,-2.0234;-2.4741,-1.0109,-2.6571;-1.5269,-.8944,-1.1366;-.7879,-1.5489,-2.6111;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662563304399</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.020725661527 0.001502270955 0.027729056068 0.005337282194</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.041204906 -0.007237933 0.000102653 0.000184770 0.000253152 0.000286905 0.000328812 0.000393011 0.000428357 0.000519836 0.000642103 0.000763780 0.000793235 0.000837722 0.000921552 0.001023132 0.001103611 0.001194112 0.001247211 0.001291539 0.001423103 0.001447757 0.001504020 0.001606186 0.001756371 0.001935460 0.001972235 0.002192280 0.002734704 0.003026690 0.003290769 0.003643494 0.003949228 0.004283114 0.004521060 0.004831805 0.004915775 0.005567491 0.005664765 0.006146493 0.006684834 0.006973457 0.007393824 0.007877014 0.007975047 0.008361802 0.008725888 0.009311300 0.009830083 0.010175924 0.010375370 0.012523193 0.012790981 0.013377033 0.014309013 0.014596298 0.014840407 0.015334958 0.015788078 0.016029496 0.016388920 0.017078965 0.017801120 0.018675807 0.018837445 0.020355305 0.021056963 0.022206088 0.023022734 0.023316840 0.023376093 0.024552124 0.025644641 0.025965387 0.026498255 0.026732279 0.027763077 0.029575691 0.030356725 0.030488295 0.031980800 0.032538465 0.032924435 0.035991377 0.038156883 0.039214665 0.039433251 0.039900661 0.040426803 0.040939955 0.042296211 0.045259836 0.046108462 0.046208299 0.049669250 0.050667589 0.051371647 0.051572718 0.051800638 0.052281764 0.052387959 0.052536276 0.053153888 0.053853019 0.054745333 0.056240604 0.056494042 0.056842344 0.057004810 0.057284646 0.057707066 0.058522425 0.059220644 0.060096790 0.060444700 0.061187900 0.061477880 0.061775257 0.064556773 0.064734817 0.065563055 0.067733057 0.068175344 0.069461422 0.071835309 0.072663386 0.076461678 0.078144967 0.080358291 0.081268141 0.082256961 0.087185721 0.089479776 0.090817725 0.092837282 0.093302694 0.094200477 0.095259027 0.095354884 0.096399091 0.096491659 0.097262546 0.098451741 0.099443541 0.099995772 0.101223875 0.102389962 0.102612232 0.103565639 0.103813591 0.104278151 0.106742634 0.107888955 0.108209009 0.108908153 0.110256764 0.112542958 0.113275272 0.115958233 0.116480450 0.117305752 0.119337406 0.122943489 0.126107601 0.127386726 0.128276479 0.129513950 0.129986515 0.133120437 0.135150929 0.136674126 0.142102989 0.143318651 0.144568569 0.145729557 0.146698297 0.152504539 0.152756582 0.157285539 0.159573221 0.170396485 0.172651058 0.174283237 0.175918489 0.180465011 0.183226911 0.185576185 0.188003217 0.188455102 0.194148043 0.201724029 0.204580354 0.204993105 0.206770199 0.207146701 0.209048606 0.210618132 0.210936664 0.212655351 0.215486714 0.217047864 0.224800308 0.231490005 0.232576186 0.233563440 0.235070156 0.244456419 0.248039644 0.254482957 0.255016222 0.256699543 0.258802144 0.271367364 0.277377972 0.290015861 0.296138882 0.297433879 0.299343367 0.304113830 0.306129438 0.307524551 0.311770022 0.320546804 0.322734936 0.324797068 0.328768619 0.345547933 0.349388279 0.350649036 0.354691290 0.358815587 0.363796475 0.369238044 0.380316700 0.389654162 0.391734452 0.405414361 0.426659477 0.430087167 0.444364650 0.463096617 0.463702460 0.475183012 0.477881267 0.478856201 0.482316890 0.498022639 0.509201260 0.542025114 0.564231216 0.566753451 0.576530506 0.583281257 0.604258567 0.625644013 0.641295188 0.643412729 0.665306147 0.671248572 0.681239298 0.681297312 0.690336195 0.691597312 0.704240524 0.705236785 0.713728490 0.714628518 0.737189841 0.750679702 0.771573338 0.775834986 0.797952689 0.813070685 0.815760618 0.818719878 0.820283621 0.821625895 0.826764072 0.830090898 0.831006844 0.840507954 0.844552428 0.847065521 0.848701543 0.856451459 0.859296076 0.867337113 0.872030218 0.875793067 0.886535925 0.887733788 0.893653401 0.911987071 0.915770107 0.923910158 0.930991197 0.933901500 0.956754499 0.958364603 0.969170994 0.975842642 0.989149822 0.999615597 1.012940769 1.034021784 1.042608950 1.049157971 1.055215859 1.072959039 1.084186681 1.088647015 1.109990515 1.110585119 1.116112356 1.122411699 1.123318467 1.134033021 1.142331713 1.161155515 1.168733319 1.172580522 1.173224171 1.200399506 1.204147408 1.214915527 1.247261532 1.291354008 1.295584852 1.301087311 1.314410328 1.326275115 1.326803089 1.330137325 1.334422766 1.340915851 1.345760981 1.361600058 1.362059163 1.378771862 1.380881297 1.381281558 1.384738360 1.557399648 1.671842511 1.772454663</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">46</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95995866" y3="-0.95028631" z3="-0.63325904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.67017488" y3="-1.94322892" z3="-1.44771831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.14922413" y3="-0.98896439" z3="-1.32263824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.82060584" y3="1.48162914" z3="-1.01796137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32070803" y3="0.31326214" z3="-0.4683424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69501104" y3="2.72059722" z3="-1.19731796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03209374" y3="2.73493869" z3="-0.84084307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37089741" y3="4.98987329" z3="-0.4795457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8284082" y3="3.83239868" z3="-0.98612643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73193683" y3="5.86500421" z3="-0.3255492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.15949639" y3="1.58185366" z3="-1.72409991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13932113" y3="0.35253703" z3="0.21477529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75102789" y3="0.36655619" z3="-0.68306227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61970987" y3="0.7245089" z3="0.20887171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7273363" y3="-0.88104325" z3="-1.53837656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08292447" y3="-2.46532821" z3="-1.35571269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84597319" y3="-5.4302922" z3="-6.36668914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61096327" y3="-5.00377407" z3="-5.38732481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98966224" y3="-3.88428384" z3="-2.90055177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58696794" y3="-3.62424136" z3="-5.22688486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35525925" y3="-5.83953234" z3="-4.29759811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.05860696" y3="-5.27377427" z3="-3.063577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2860069" y3="-3.03345698" z3="-3.98980376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79499591" y3="-2.95016667" z3="-6.06147398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.39976447" y3="-6.92642355" z3="-4.40308266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.89425134" y3="-5.91368343" z3="-2.19239832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61757438" y3="-3.34521998" z3="-1.64237118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.37725695" y3="-3.82312296" z3="-0.88552089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.73654455" y3="-4.81843968" z3="-1.15946638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38689492" y3="-3.53532652" z3="0.56640727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4027625" y3="-3.08195267" z3="3.32901539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70817475" y3="-4.5715944" z3="1.45110499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09026181" y3="-2.26749607" z3="1.0764868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09627645" y3="-2.04314511" z3="2.44890442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70737551" y3="-4.34747998" z3="2.82656149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91860166" y3="-5.57274709" z3="1.06368325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12870143" y3="-1.42449774" z3="0.4195038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14803172" y3="-1.04257484" z3="2.81604519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92433032" y3="-5.17396194" z3="3.50842576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39623736" y3="-2.90962187" z3="4.40924149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24192395" y3="-1.69740224" z3="-3.94181274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43260356" y3="-1.31024828" z3="-3.04132853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36572039" y3="3.66761241" z3="-1.18498983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16183233" y3="-2.92317965" z3="-1.68857024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9342791" y3="-3.13733043" z3="-0.54261657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09597213" y3="-2.30277271" z3="0.43124448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82126642" y3="-0.74947734" z3="0.76201459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.85567346" y3="-0.33177779" z3="-0.73061062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50430008" y3="0.48221307" z3="1.20400949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.88182103" y3="-1.11667114" z3="2.25716784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43268878" y3="-4.349865" z3="-0.35199362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14954629" y3="-4.62605263" z3="0.84190704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.24028475" y3="-0.14958363" z3="-1.63110175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.42686269" y3="0.59371763" z3="-0.54010781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.57653166" y3="-1.13989921" z3="-0.95886621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63872643" y3="0.56186679" z3="0.51294539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.0904457" y3="0.24681394" z3="2.20482138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.988111" y3="1.47811916" z3="1.26293508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.32891685" y3="-0.18540837" z3="2.64693024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.70706741" y3="-1.8130414" z3="2.02313128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.27209176" y3="-1.55995553" z3="3.06661235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08269696" y3="-4.03960085" z3="0.8771886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53694523" y3="-4.40386681" z3="1.72966043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38727125" y3="-5.69777897" z3="0.80062574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3010376" y3="-2.19349686" z3="-0.15399637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13522926" y3="-3.26457481" z3="-1.04356292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.46900305" y3="-4.42091048" z3="-0.65593824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9788315" y3="-4.50260784" z3="0.64222162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14798367" y3="-3.46984745" z3="1.55966751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.80065272" y3="-2.31328822" z3="1.15154728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49148218" y3="-3.17129465" z3="-2.07269311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.30717091" y3="-5.2402019" z3="-1.3572649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22809906" y3="-5.69195644" z3="1.04719927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74343676" y3="-3.57074943" z3="2.56780429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90932803" y3="-1.48257236" z3="1.85078159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50116969" y3="4.01758538" z3="-0.14078139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86461329" y3="3.77027852" z3="-0.22825754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.35809833" y3="3.16463077" z3="-1.37908897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.53117299" y3="2.8388785" z3="-2.4509189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.16999274" y3="3.09391742" z3="-2.34766833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.09054364" y3="4.44268061" z3="0.77824816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.54092893" y3="4.01470713" z3="0.59120676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.78325322" y3="2.82972085" z3="-1.45196986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.95569267" y3="2.37656493" z3="-3.34279936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.49047941" y3="2.81780003" z3="-3.17099373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13088366" y3="-5.92720309" z3="2.23062602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.72897348" y3="-6.37180482" z3="0.16919458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.21353135" y3="2.39651064" z3="-2.49695537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45218502" y3="2.98212552" z3="-0.4430637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.70875411" y3="0.17490072" z3="-1.91080408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.02371197" y3="1.4195038" z3="-1.7955202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.91764691" y3="0.10823198" z3="-2.6571147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.4154642" y3="1.21766458" z3="-3.29414271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.43923971" y3="-0.85145442" z3="-2.72468057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.34344252" y3="1.15427037" z3="-3.86917127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54817232" y3="2.54154007" z3="-2.49681822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.71125082" y3="2.44353735" z3="-3.22228365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.01162529" y3="3.49170208" z3="-2.46191371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09251463" y3="3.31973033" z3="-3.75430988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5721229" y3="3.92115175" z3="-0.24276942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73795286" y3="5.06955646" z3="-0.10720983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90118886" y3="3.99446803" z3="0.26137157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38687181" y3="5.15520065" z3="0.81406585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53991768" y3="3.11043292" z3="0.21230095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41127912" y3="5.18538391" z3="1.19590982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.27395743" y3="6.26091382" z3="0.45539825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57160881" y3="6.30929801" z3="0.90049842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.62545955" y3="7.13852265" z3="0.53882579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.97215198" y3="7.22921861" z3="1.3354301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40308609" y3="-3.82611393" z3="-2.88230218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57664297" y3="-4.87429377" z3="-2.59503604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28840826" y3="-3.48011063" z3="-3.44830426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54245385" y3="-3.79193671" z3="-3.56880149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72311143" y3="-1.52427101" z3="-2.02890063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47208753" y3="-1.01813834" z3="-2.66375864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53381898" y3="-0.89860433" z3="-1.14421212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78726417" y3="-1.55445993" z3="-2.61125764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.96,-.9503,-.6333;6.6702,-1.9432,-1.4477;6.1492,-.989,-1.3226;4.8206,1.4816,-1.018;4.3207,.3133,-.4683;2.695,2.7206,-1.1973;4.0321,2.7349,-.8408;2.3709,4.9899,-.4795;1.8284,3.8324,-.9861;1.7319,5.865,-.3255;2.1595,1.5819,-1.7241;3.1393,.3525,.2148;1.751,.3666,-.6831;.6197,.7245,.2089;1.7273,-.881,-1.5384;1.0829,-2.4653,-1.3557;1.846,-5.4303,-6.3667;1.611,-5.0038,-5.3873;.9897,-3.8843,-2.9006;1.587,-3.6242,-5.2269;1.3553,-5.8395,-4.2976;1.0586,-5.2738,-3.0636;1.286,-3.0335,-3.9898;1.795,-2.9502,-6.0615;1.3998,-6.9264,-4.4031;.8943,-5.9137,-2.1924;.6176,-3.3452,-1.6424;-.3773,-3.8231,-.8855;-.7365,-4.8184,-1.1595;-.3869,-3.5353,.5664;-.4028,-3.082,3.329;-.7082,-4.5716,1.4511;-.0903,-2.2675,1.0765;-.0963,-2.0431,2.4489;-.7074,-4.3475,2.8266;-.9186,-5.5727,1.0637;.1287,-1.4245,.4195;.148,-1.0426,2.816;-.9243,-5.174,3.5084;-.3962,-2.9096,4.4092;1.2419,-1.6974,-3.9418;1.4326,-1.3102,-3.0413;.3657,3.6676,-1.185;-2.1618,-2.9232,-1.6886;-2.9343,-3.1373,-.5426;-3.096,-2.3028,.4312;-3.8213,-.7495,.762;-4.8557,-.3318,-.7306;-2.5043,.4822,1.204;-4.8818,-1.1167,2.2572;-3.4327,-4.3499,-.352;-4.1495,-4.6261,.8419;-4.2403,-.1496,-1.6311;-5.4269,.5937,-.5401;-5.5765,-1.1399,-.9589;-1.6387,.5619,.5129;-2.0904,.2468,2.2048;-2.9881,1.4781,1.2629;-5.3289,-.1854,2.6469;-5.7071,-1.813,2.0231;-4.2721,-1.56,3.0666;-5.0827,-4.0396,.8772;-3.5369,-4.4039,1.7297;-4.3873,-5.6978,.8006;4.301,-2.1935,-.154;4.1352,-3.2646,-1.0436;3.469,-4.4209,-.6559;2.9788,-4.5026,.6422;3.148,-3.4698,1.5597;3.8007,-2.3133,1.1515;4.4915,-3.1713,-2.0727;3.3072,-5.2402,-1.3573;2.2281,-5.692,1.0472;2.7434,-3.5707,2.5678;3.9093,-1.4826,1.8508;-.5012,4.0176,-.1408;-1.8646,3.7703,-.2283;-2.3581,3.1646,-1.3791;-1.5312,2.8389,-2.4509;-.17,3.0939,-2.3477;-.0905,4.4427,.7782;-2.5409,4.0147,.5912;-3.7833,2.8297,-1.452;-1.9557,2.3766,-3.3428;.4905,2.8178,-3.171;2.1309,-5.9272,2.2306;1.729,-6.3718,.1692;-4.2135,2.3965,-2.497;-4.4522,2.9821,-.4431;6.7088,.1749,-1.9108;6.0237,1.4195,-1.7955;7.9176,.1082,-2.6571;8.4155,1.2177,-3.2941;8.4392,-.8515,-2.7247;9.3434,1.1543,-3.8692;6.5482,2.5415,-2.4968;7.7113,2.4435,-3.2223;6.0116,3.4917,-2.4619;8.0925,3.3197,-3.7543;4.5721,3.9212,-.2428;3.738,5.0696,-.1072;5.9012,3.9945,.2614;6.3869,5.1552,.8141;6.5399,3.1104,.2123;7.4113,5.1854,1.1959;4.274,6.2609,.4554;5.5716,6.3093,.9005;3.6255,7.1385,.5388;5.9722,7.2292,1.3354;-2.4031,-3.8261,-2.8823;-2.5766,-4.8743,-2.595;-3.2884,-3.4801,-3.4483;-1.5425,-3.7919,-3.5688;-1.7231,-1.5243,-2.0289;-2.4721,-1.0181,-2.6638;-1.5338,-.8986,-1.1442;-.7873,-1.5545,-2.6113;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662620999710</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.012742274457 0.001119047386 0.020973157117 0.005337519095</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.041690237 -0.005182985 0.000112398 0.000194431 0.000256042 0.000291053 0.000330077 0.000393871 0.000428327 0.000519851 0.000642072 0.000763811 0.000793459 0.000845706 0.000923317 0.001032189 0.001108361 0.001193902 0.001247333 0.001291553 0.001423438 0.001447548 0.001504050 0.001609409 0.001756373 0.001968223 0.002035018 0.002202119 0.002749808 0.003034525 0.003306211 0.003665077 0.003951048 0.004288112 0.004573705 0.004835279 0.004970217 0.005568839 0.005685251 0.006147195 0.006686199 0.006977851 0.007393912 0.007883409 0.007995407 0.008413061 0.008731753 0.009314530 0.009834577 0.010178046 0.010381066 0.012524251 0.012790991 0.013379184 0.014309855 0.014596258 0.014841413 0.015335471 0.015789127 0.016029284 0.016389168 0.017079088 0.017813850 0.018675844 0.018901700 0.020357665 0.021065977 0.022206397 0.023027806 0.023341968 0.023994912 0.024567250 0.025648308 0.025969355 0.026501137 0.026732255 0.027763260 0.029674340 0.030405861 0.030663205 0.031984468 0.032596196 0.032981746 0.036137485 0.038222486 0.039302979 0.039476005 0.040310629 0.040794829 0.041113082 0.042848753 0.045262272 0.046134682 0.046311872 0.049669249 0.050667607 0.051371856 0.051572890 0.051800739 0.052281765 0.052387980 0.052537605 0.053403231 0.053865699 0.054745892 0.056493704 0.056842276 0.056955605 0.057257950 0.057459827 0.058107572 0.058553092 0.059220651 0.060126442 0.060444472 0.061314762 0.061478233 0.061786256 0.064556850 0.064735046 0.065564104 0.067733176 0.068189639 0.069481788 0.071836962 0.072663407 0.076461699 0.078151620 0.080365529 0.081269076 0.082259096 0.087193255 0.089479877 0.090818273 0.092837641 0.093308470 0.094201384 0.095259400 0.095361649 0.096401188 0.096491944 0.097275159 0.098451696 0.099443947 0.100048308 0.101223858 0.102397763 0.102611655 0.103566399 0.103813820 0.104297705 0.106760232 0.107889033 0.108225943 0.108934697 0.110269006 0.112544678 0.113275757 0.115957979 0.116482084 0.117307765 0.119337080 0.122943081 0.126115432 0.127452367 0.128457230 0.129929147 0.130808320 0.133169940 0.135180143 0.136673783 0.142102933 0.143306206 0.144568441 0.145731447 0.146697866 0.152519136 0.153157054 0.157285468 0.159606198 0.170412718 0.172812372 0.174290371 0.175951628 0.180468504 0.183226824 0.185591463 0.188003319 0.188471550 0.194153085 0.201724657 0.204578739 0.205028003 0.206771093 0.207147033 0.209053238 0.210647992 0.211386046 0.212655511 0.215498066 0.217081338 0.224802291 0.231491071 0.232578855 0.233586396 0.235076874 0.244462252 0.248041308 0.254489899 0.255019580 0.256700437 0.258803513 0.271367343 0.277416196 0.290023938 0.296150691 0.297449990 0.299344218 0.304114783 0.306143247 0.307524947 0.311786645 0.320549455 0.322748780 0.324796654 0.328794968 0.345550470 0.349488255 0.350660867 0.354691487 0.358818148 0.363798077 0.369315755 0.380500367 0.389658248 0.396180567 0.405654661 0.426808009 0.430095333 0.444364536 0.463096728 0.463757652 0.475212771 0.477882642 0.479084912 0.482341235 0.498022638 0.509343382 0.542059925 0.564302597 0.566753992 0.576816249 0.583288363 0.604262297 0.626599739 0.643296183 0.644384350 0.665309862 0.671296707 0.681262648 0.681297290 0.690344414 0.691602310 0.704240537 0.705256628 0.713972127 0.717086179 0.737190802 0.750679745 0.771573526 0.775835558 0.797963731 0.813204723 0.815789516 0.818935215 0.820294765 0.822064226 0.827235077 0.830651932 0.831204167 0.840507995 0.844556565 0.847462019 0.848801202 0.856453189 0.859305411 0.867337260 0.872032816 0.875843162 0.886535913 0.887738687 0.893660174 0.913173522 0.916701725 0.923911252 0.931045687 0.934006526 0.956867284 0.958365526 0.969180501 0.975843420 0.989150162 0.999615593 1.012941287 1.034021769 1.042609211 1.049167007 1.055217577 1.073000277 1.084186725 1.088647257 1.109990531 1.110585118 1.116112362 1.122411761 1.123318519 1.134033886 1.142339875 1.161156780 1.168738008 1.172583140 1.173229283 1.200401775 1.204191140 1.215008122 1.247261568 1.291410077 1.295595792 1.301247897 1.314410709 1.326276553 1.326812036 1.330137368 1.334425063 1.340916049 1.345762406 1.361946271 1.362146928 1.378772140 1.380881909 1.381284605 1.384800919 1.557419128 1.671842695 1.782272658</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">47</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95631462" y3="-0.95084827" z3="-0.63660185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.66579922" y3="-1.94392969" z3="-1.45249123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.14504009" y3="-0.98961886" z3="-1.32696759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81765289" y3="1.48123229" z3="-1.02027975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.317611" y3="0.31287543" z3="-0.47084654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69284608" y3="2.72232477" z3="-1.1956399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.03041183" y3="2.73498104" z3="-0.84091439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37166416" y3="4.99070527" z3="-0.47356072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82747458" y3="3.83451201" z3="-0.98131432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73363096" y3="5.86612509" z3="-0.31719607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.15566999" y3="1.58484044" z3="-1.72345139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13682052" y3="0.35266587" z3="0.21327539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74793954" y3="0.36824933" z3="-0.68360765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61744658" y3="0.72595104" z3="0.20962067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.72317463" y3="-0.87841374" z3="-1.53983318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08253225" y3="-2.46528137" z3="-1.35631574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85044598" y3="-5.43481645" z3="-6.36368974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61488167" y3="-5.00760453" z3="-5.38476125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99174468" y3="-3.88610477" z3="-2.8990497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58966989" y3="-3.62792567" z3="-5.22556489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35953887" y3="-5.84246744" z3="-4.29430787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06207316" y3="-5.27572247" z3="-3.0609041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28774586" y3="-3.0362521" z3="-3.9892072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79722152" y3="-2.95442193" z3="-6.06072681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40493989" y3="-6.92944324" z3="-4.39874089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.89799216" y3="-5.91497852" z3="-2.18918619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61891642" y3="-3.34620711" z3="-1.64172402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.37865269" y3="-3.8219379" z3="-0.88598529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.7330283" y3="-4.8208746" z3="-1.15602094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38542185" y3="-3.53415131" z3="0.56691881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39861013" y3="-3.0761854" z3="3.32947538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70208152" y3="-4.57006404" z3="1.45439689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09121807" y3="-2.26499056" z3="1.07475062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09598594" y3="-2.03811986" z3="2.44688202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70018723" y3="-4.34351906" z3="2.82962091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91013553" y3="-5.57267893" z3="1.06920028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12520897" y3="-1.42281492" z3="0.41614391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14594793" y3="-1.03612553" z3="2.8118009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91417752" y3="-5.16938386" z3="3.51323559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39164852" y3="-2.90167039" z3="4.40936772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24247961" y3="-1.70006567" z3="-3.94272083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43107713" y3="-1.31158804" z3="-3.04253032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3643238" y3="3.67168442" z3="-1.17854121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15711633" y3="-2.93143328" z3="-1.68764692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9326936" y3="-3.14139933" z3="-0.54195513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09715589" y3="-2.30219563" z3="0.4268667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81788225" y3="-0.74897369" z3="0.75540284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.84212732" y3="-0.32811898" z3="-0.74512462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50155791" y3="0.48025017" z3="1.205607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.89591977" y3="-1.11530649" z3="2.24302169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42852604" y3="-4.3540273" z3="-0.34739933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14367687" y3="-4.62842603" z3="0.84790334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.23972604" y3="-0.14262361" z3="-1.64148073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41994651" y3="0.59771436" z3="-0.55791137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.55915829" y3="-1.13526631" z3="-0.97273516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64612863" y3="0.5600977" z3="0.51880198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.092244" y3="0.24765788" z3="2.20014819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98325012" y3="1.47207066" z3="1.26413676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.34313928" y3="-0.17990316" z3="2.62764529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.72123639" y3="-1.80790204" z3="2.00273608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.2928286" y3="-1.56044429" z3="3.05474174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07824736" y3="-4.04426663" z3="0.88303894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5299642" y3="-4.40263526" z3="1.73379085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37854019" y3="-5.700576" z3="0.80913954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2982143" y3="-2.19408403" z3="-0.15637967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13463753" y3="-3.26675471" z3="-1.04449189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47017694" y3="-4.42366438" z3="-0.65550936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.97954939" y3="-4.50431362" z3="0.64251003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14631612" y3="-3.46984781" z3="1.55852449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79716943" y3="-2.31273957" z3="1.14905107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49127874" y3="-3.17449093" z3="-2.07358227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.31004866" y3="-5.2442241" z3="-1.35576385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23054991" y3="-5.69428728" z3="1.04874844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74128758" y3="-3.56988236" z3="2.56656393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90380776" y3="-1.48062764" z3="1.84697571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50078627" y3="4.02053641" z3="-0.13243927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86473665" y3="3.77578654" z3="-0.21887237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36054994" y3="3.17368537" z3="-1.37026713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.53558837" y3="2.8496381" z3="-2.44451382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.17373319" y3="3.1018011" z3="-2.34214295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08828664" y3="4.44265895" z3="0.78725309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53967031" y3="4.01914373" z3="0.60218522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.78567536" y3="2.8409123" z3="-1.4404799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.96181283" y3="2.39044875" z3="-3.33713111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.48544181" y3="2.82639106" z3="-3.1667195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13438756" y3="-5.92886246" z3="2.23237412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.73155985" y3="-6.37527974" z3="0.17160961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.22075344" y3="2.41748379" z3="-2.49078728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45459676" y3="2.99478341" z3="-0.43817863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.70444811" y3="0.17419989" z3="-1.91531332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.02001399" y3="1.41901032" z3="-1.79889387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.91272319" y3="0.10744169" z3="-2.66261616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.41047797" y3="1.21703524" z3="-3.29942088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.43389488" y3="-0.85241031" z3="-2.73110915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.33797247" y3="1.15358299" z3="-3.87522068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54438154" y3="2.54125828" z3="-2.49989035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.70685561" y3="2.44318392" z3="-3.22630439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00823827" y3="3.49161849" z3="-2.46395896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08809523" y3="3.31952622" z3="-3.75810118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57231257" y3="3.91974072" z3="-0.24167981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73932072" y3="5.06863395" z3="-0.10301068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90218083" y3="3.99100453" z3="0.2606835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38963453" y3="5.15034465" z3="0.81475112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54010105" y3="3.10651299" z3="0.208918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4146227" y3="5.17897087" z3="1.19518668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2771523" y3="6.25856533" z3="0.4609117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57546495" y3="6.30501103" z3="0.90433884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.62953994" y3="7.13662295" z3="0.54671801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.97741884" y3="7.22383089" z3="1.34032018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40063821" y3="-3.83572074" z3="-2.87962946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57247713" y3="-4.88348125" z3="-2.5894823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28719237" y3="-3.49230019" z3="-3.4453264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54064974" y3="-3.80208232" z3="-3.56699962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72303855" y3="-1.53123396" z3="-2.03222614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47305762" y3="-1.02871905" z3="-2.66583464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53227862" y3="-0.90287251" z3="-1.15176281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79111356" y3="-1.55905256" z3="-2.6163584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9563,-.9508,-.6366;6.6658,-1.9439,-1.4525;6.145,-.9896,-1.327;4.8177,1.4812,-1.0203;4.3176,.3129,-.4708;2.6928,2.7223,-1.1956;4.0304,2.735,-.8409;2.3717,4.9907,-.4736;1.8275,3.8345,-.9813;1.7336,5.8661,-.3172;2.1557,1.5848,-1.7235;3.1368,.3527,.2133;1.7479,.3682,-.6836;.6174,.726,.2096;1.7232,-.8784,-1.5398;1.0825,-2.4653,-1.3563;1.8504,-5.4348,-6.3637;1.6149,-5.0076,-5.3848;.9917,-3.8861,-2.899;1.5897,-3.6279,-5.2256;1.3595,-5.8425,-4.2943;1.0621,-5.2757,-3.0609;1.2877,-3.0363,-3.9892;1.7972,-2.9544,-6.0607;1.4049,-6.9294,-4.3987;.898,-5.915,-2.1892;.6189,-3.3462,-1.6417;-.3787,-3.8219,-.886;-.733,-4.8209,-1.156;-.3854,-3.5342,.5669;-.3986,-3.0762,3.3295;-.7021,-4.5701,1.4544;-.0912,-2.265,1.0748;-.096,-2.0381,2.4469;-.7002,-4.3435,2.8296;-.9101,-5.5727,1.0692;.1252,-1.4228,.4161;.1459,-1.0361,2.8118;-.9142,-5.1694,3.5132;-.3916,-2.9017,4.4094;1.2425,-1.7001,-3.9427;1.4311,-1.3116,-3.0425;.3643,3.6717,-1.1785;-2.1571,-2.9314,-1.6876;-2.9327,-3.1414,-.542;-3.0972,-2.3022,.4269;-3.8179,-.749,.7554;-4.8421,-.3281,-.7451;-2.5016,.4803,1.2056;-4.8959,-1.1153,2.243;-3.4285,-4.354,-.3474;-4.1437,-4.6284,.8479;-4.2397,-.1426,-1.6415;-5.4199,.5977,-.5579;-5.5592,-1.1353,-.9727;-1.6461,.5601,.5188;-2.0922,.2477,2.2001;-2.9833,1.4721,1.2641;-5.3431,-.1799,2.6276;-5.7212,-1.8079,2.0027;-4.2928,-1.5604,3.0547;-5.0782,-4.0443,.883;-3.53,-4.4026,1.7338;-4.3785,-5.7006,.8091;4.2982,-2.1941,-.1564;4.1346,-3.2668,-1.0445;3.4702,-4.4237,-.6555;2.9795,-4.5043,.6425;3.1463,-3.4698,1.5585;3.7972,-2.3127,1.1491;4.4913,-3.1745,-2.0736;3.31,-5.2442,-1.3558;2.2305,-5.6943,1.0487;2.7413,-3.5699,2.5666;3.9038,-1.4806,1.847;-.5008,4.0205,-.1324;-1.8647,3.7758,-.2189;-2.3605,3.1737,-1.3703;-1.5356,2.8496,-2.4445;-.1737,3.1018,-2.3421;-.0883,4.4427,.7873;-2.5397,4.0191,.6022;-3.7857,2.8409,-1.4405;-1.9618,2.3904,-3.3371;.4854,2.8264,-3.1667;2.1344,-5.9289,2.2324;1.7316,-6.3753,.1716;-4.2208,2.4175,-2.4908;-4.4546,2.9948,-.4382;6.7044,.1742,-1.9153;6.02,1.419,-1.7989;7.9127,.1074,-2.6626;8.4105,1.217,-3.2994;8.4339,-.8524,-2.7311;9.338,1.1536,-3.8752;6.5444,2.5413,-2.4999;7.7069,2.4432,-3.2263;6.0082,3.4916,-2.464;8.0881,3.3195,-3.7581;4.5723,3.9197,-.2417;3.7393,5.0686,-.103;5.9022,3.991,.2607;6.3896,5.1503,.8148;6.5401,3.1065,.2089;7.4146,5.179,1.1952;4.2772,6.2586,.4609;5.5755,6.305,.9043;3.6295,7.1366,.5467;5.9774,7.2238,1.3403;-2.4006,-3.8357,-2.8796;-2.5725,-4.8835,-2.5895;-3.2872,-3.4923,-3.4453;-1.5406,-3.8021,-3.567;-1.723,-1.5312,-2.0322;-2.4731,-1.0287,-2.6658;-1.5323,-.9029,-1.1518;-.7911,-1.5591,-2.6164;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662650641498</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006291617767 0.000964814170 0.028258616507 0.005337618980</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.042042532 -0.005264498 0.000110792 0.000193073 0.000256137 0.000292285 0.000330600 0.000396017 0.000428300 0.000522275 0.000642900 0.000768547 0.000793671 0.000852287 0.000923320 0.001044113 0.001153691 0.001197232 0.001248680 0.001291560 0.001424180 0.001450732 0.001506136 0.001609873 0.001756391 0.001968250 0.002091115 0.002205665 0.002756983 0.003039113 0.003335560 0.003908780 0.003973928 0.004304300 0.004648283 0.004835247 0.005231615 0.005582433 0.006037846 0.006150416 0.006695785 0.006980231 0.007398918 0.007985685 0.008076674 0.008670821 0.008753255 0.009333063 0.009910013 0.010184474 0.010396809 0.012524396 0.012791018 0.013380718 0.014310974 0.014597854 0.014841821 0.015335485 0.015795605 0.016029181 0.016389211 0.017078970 0.017819905 0.018676039 0.018925339 0.020358739 0.021070612 0.022206689 0.023028594 0.023341571 0.024188685 0.024587968 0.025653798 0.025972919 0.026503460 0.026732227 0.027763544 0.029718919 0.030413973 0.030837245 0.031999966 0.032631108 0.033049329 0.036160128 0.038235741 0.039311695 0.039559664 0.040333072 0.040841871 0.041277872 0.043546644 0.045266248 0.046139564 0.046378460 0.049669241 0.050667653 0.051372087 0.051573097 0.051800722 0.052281765 0.052387982 0.052537993 0.053798326 0.054170645 0.054747904 0.056494120 0.056842407 0.056980251 0.057282024 0.057620988 0.058501972 0.059031836 0.059220618 0.060121489 0.060445791 0.061369522 0.061483680 0.061784459 0.064556917 0.064734927 0.065564785 0.067734753 0.068190293 0.069484034 0.071837041 0.072663390 0.076461910 0.078155377 0.080365193 0.081286508 0.082259019 0.087195416 0.089479929 0.090818379 0.092837985 0.093309722 0.094203018 0.095259573 0.095361571 0.096404599 0.096492326 0.097276070 0.098456741 0.099444093 0.100319018 0.101224381 0.102404127 0.102612096 0.103565807 0.103815951 0.104295861 0.106759730 0.107897254 0.108257382 0.108932557 0.110268928 0.112545613 0.113277441 0.115960705 0.116482005 0.117307563 0.119369153 0.122943334 0.126120722 0.127478628 0.128505378 0.129951014 0.131845508 0.133210064 0.135191507 0.136674687 0.142102925 0.143370795 0.144569940 0.145730474 0.146697784 0.152523014 0.154196872 0.157285568 0.159613573 0.170417422 0.173333327 0.174506987 0.175975161 0.180471832 0.183226666 0.185590176 0.188003727 0.188476204 0.194228488 0.201731071 0.204622151 0.205045172 0.206775751 0.207147364 0.209054957 0.210647459 0.212536797 0.212667921 0.215504857 0.217090986 0.224803325 0.231492530 0.232584897 0.233590413 0.235077865 0.244464259 0.248064519 0.254489514 0.255032333 0.256701005 0.258803414 0.271367419 0.277425023 0.290026418 0.296156336 0.297449580 0.299344307 0.304115641 0.306148709 0.307525408 0.311931851 0.320550744 0.322752579 0.324849385 0.328796436 0.345550563 0.349483294 0.350660605 0.354691578 0.358849028 0.363798362 0.369833836 0.380548438 0.389759812 0.397947687 0.405807071 0.426804731 0.430098063 0.444381073 0.463150176 0.463766106 0.475500444 0.477882615 0.479087418 0.482345911 0.498022663 0.509370978 0.542072955 0.564325242 0.566754136 0.576896061 0.583289148 0.604264922 0.626643430 0.643350902 0.645918473 0.665314284 0.671321532 0.681292819 0.681313421 0.690764714 0.691603690 0.704240565 0.705257291 0.714002306 0.718981079 0.737191155 0.750679769 0.771573629 0.775835997 0.798068777 0.813957366 0.816014711 0.819321620 0.820342200 0.822713263 0.829418732 0.830907906 0.831478015 0.840511168 0.844560535 0.848542870 0.849915282 0.856454282 0.859329605 0.867337698 0.872033988 0.875852647 0.886603270 0.887815996 0.893662570 0.914039140 0.917947984 0.923913311 0.931098621 0.934055421 0.957280562 0.958366509 0.969206060 0.975846196 0.989150496 0.999615671 1.012942167 1.034021916 1.042609196 1.049176417 1.055219084 1.073023770 1.084186818 1.088647479 1.109990535 1.110585123 1.116112681 1.122411832 1.123318614 1.134036452 1.142352195 1.161158325 1.168739414 1.172583736 1.173230445 1.200402427 1.204200105 1.215064992 1.247261588 1.291422947 1.295600106 1.301309778 1.314411168 1.326276686 1.326813028 1.330137303 1.334425687 1.340916234 1.345764304 1.361988165 1.362303502 1.378772360 1.380881896 1.381284780 1.384803519 1.557430125 1.671842680 1.784874144</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">48</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95333921" y3="-0.95143189" z3="-0.6399669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.66205307" y3="-1.9445196" z3="-1.45753217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.14142857" y3="-0.99020962" z3="-1.33147552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81500057" y3="1.48079299" z3="-1.02258712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.31497593" y3="0.31234877" z3="-0.47334486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.69080014" y3="2.7235624" z3="-1.19394327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0288451" y3="2.73485255" z3="-0.84102625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3723364" y3="4.9910941" z3="-0.46807307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82657192" y3="3.8360775" z3="-0.97686119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73515684" y3="5.86672687" z3="-0.30959105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.15218963" y3="1.58703644" z3="-1.72260001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13477987" y3="0.35220969" z3="0.21179636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74493833" y3="0.36953053" z3="-0.68369095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61549827" y3="0.72677737" z3="0.21094011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.71872684" y3="-0.8766384" z3="-1.54090944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08384735" y3="-2.46533714" z3="-1.35558717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85453212" y3="-5.43818465" z3="-6.360924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61842139" y3="-5.01043942" z3="-5.38235574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99436656" y3="-3.88775363" z3="-2.89760511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59221905" y3="-3.63073767" z3="-5.22415578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36338051" y3="-5.84477807" z3="-4.29137465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06528353" y3="-5.27740468" z3="-3.05848718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28986993" y3="-3.03829563" z3="-3.98816011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79953033" y3="-2.95768649" z3="-6.05973275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40952956" y3="-6.93177887" z3="-4.39500816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90145531" y3="-5.91620378" z3="-2.18640826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62145523" y3="-3.34748898" z3="-1.64017495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.37189003" y3="-3.82627452" z3="-0.88215798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.72875595" y3="-4.82317064" z3="-1.1535065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38249961" y3="-3.53424526" z3="0.56897795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39626291" y3="-3.07243021" z3="3.33013642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69772992" y3="-4.56921722" z3="1.45727324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09158027" y3="-2.26337461" z3="1.07468652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09622704" y3="-2.03483657" z3="2.44636192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69592974" y3="-4.3407548" z3="2.83203592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90394028" y3="-5.57250618" z3="1.073256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12230586" y3="-1.42161953" z3="0.41468319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14389598" y3="-1.03205566" z3="2.80983011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90815488" y3="-5.16601073" z3="3.51672195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38902817" y3="-2.89672127" z3="4.40978635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24405303" y3="-1.70225125" z3="-3.94292866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43085089" y3="-1.31227623" z3="-3.04289123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3630349" y3="3.67525598" z3="-1.17297947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15923172" y3="-2.93348167" z3="-1.68865501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.93125599" y3="-3.14345472" z3="-0.54182328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09872356" y3="-2.30099682" z3="0.42457561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82395456" y3="-0.74854373" z3="0.74862137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.84065812" y3="-0.32418977" z3="-0.75612406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50770146" y3="0.47945431" z3="1.20532291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.90445198" y3="-1.11203014" z3="2.23027471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4223376" y3="-4.35887974" z3="-0.34154107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13837112" y3="-4.62972912" z3="0.85322326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.21302898" y3="-0.12749826" z3="-1.64717625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41921803" y3="0.59421999" z3="-0.56118921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.55192253" y3="-1.13517599" z3="-1.00099378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6361558" y3="0.55308232" z3="0.52565474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.10936816" y3="0.24894226" z3="2.21134751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98770158" y3="1.47514414" z3="1.25427606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.35127066" y3="-0.17654918" z3="2.61346411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.72786855" y3="-1.80439386" z3="1.98904219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.30514789" y3="-1.55648235" z3="3.04284648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07177713" y3="-4.04468681" z3="0.88763334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5263303" y3="-4.40385719" z3="1.7392244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37431306" y3="-5.70093826" z3="0.81541086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29609738" y3="-2.19469961" z3="-0.15874212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13431914" y3="-3.26877117" z3="-1.0454665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47137621" y3="-4.42608221" z3="-0.65513769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98030195" y3="-4.50566207" z3="0.64278422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14528214" y3="-3.46977403" z3="1.55746496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79467429" y3="-2.31234817" z3="1.14667262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49126047" y3="-3.17748223" z3="-2.07454229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.31272498" y3="-5.24780455" z3="-1.35433844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2325661" y3="-5.69597658" z3="1.05021467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73992147" y3="-3.5689591" z3="2.56546452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89975216" y3="-1.47908652" z3="1.84340791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50068388" y3="4.022969" z3="-0.12544203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86512272" y3="3.78069634" z3="-0.21149811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36293699" y3="3.18294174" z3="-1.36431843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.53923919" y3="2.8597565" z3="-2.43963355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.17680126" y3="3.10879151" z3="-2.33732652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08676217" y3="4.44196311" z3="0.79510522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53881894" y3="4.02248536" z3="0.61108303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.78854414" y3="2.85217141" z3="-1.43408169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.96690715" y3="2.40317173" z3="-3.33280421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.48141644" y3="2.83368652" z3="-3.1626483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13720031" y3="-5.92985767" z3="2.23400233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.73358083" y3="-6.37788433" z3="0.17371616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.22580724" y3="2.43806516" z3="-2.48683417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45330796" y3="2.99308839" z3="-0.42263255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.70050878" y3="0.17363013" z3="-1.92005794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.01656757" y3="1.41858172" z3="-1.80240089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.90806119" y3="0.10686225" z3="-2.66853852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.40556234" y3="1.21663509" z3="-3.30522397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.42888619" y3="-0.85310658" z3="-2.73800233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.3324988" y3="1.15319537" z3="-3.88192567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54065607" y3="2.54106029" z3="-2.5032266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.70242682" y3="2.44298825" z3="-3.23076942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00485319" y3="3.49157231" z3="-2.46624193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08349751" y3="3.3194926" z3="-3.76241819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57251492" y3="3.91834266" z3="-0.240906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74054958" y3="5.06757099" z3="-0.09928825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90319251" y3="3.98789682" z3="0.25954143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39228039" y3="5.14600748" z3="0.81469127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54044446" y3="3.10308953" z3="0.20523616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41785568" y3="5.17333824" z3="1.1936163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28006212" y3="6.25624632" z3="0.46566722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57904622" y3="6.30107567" z3="0.90727865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63324444" y3="7.13465001" z3="0.55375641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98229406" y3="7.21892425" z3="1.34408903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39883769" y3="-3.84305078" z3="-2.87772002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56887819" y3="-4.89032122" z3="-2.58429311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28596578" y3="-3.50338532" z3="-3.44533582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53873079" y3="-3.80997212" z3="-3.56492627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72366658" y3="-1.53594642" z3="-2.03674631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47151235" y3="-1.0410624" z3="-2.69375122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5494763" y3="-0.89520138" z3="-1.15337704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77869872" y3="-1.56943317" z3="-2.60909672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9533,-.9514,-.64;6.6621,-1.9445,-1.4575;6.1414,-.9902,-1.3315;4.815,1.4808,-1.0226;4.315,.3123,-.4733;2.6908,2.7236,-1.1939;4.0288,2.7349,-.841;2.3723,4.9911,-.4681;1.8266,3.8361,-.9769;1.7352,5.8667,-.3096;2.1522,1.587,-1.7226;3.1348,.3522,.2118;1.7449,.3695,-.6837;.6155,.7268,.2109;1.7187,-.8766,-1.5409;1.0838,-2.4653,-1.3556;1.8545,-5.4382,-6.3609;1.6184,-5.0104,-5.3824;.9944,-3.8878,-2.8976;1.5922,-3.6307,-5.2242;1.3634,-5.8448,-4.2914;1.0653,-5.2774,-3.0585;1.2899,-3.0383,-3.9882;1.7995,-2.9577,-6.0597;1.4095,-6.9318,-4.395;.9015,-5.9162,-2.1864;.6215,-3.3475,-1.6402;-.3719,-3.8263,-.8822;-.7288,-4.8232,-1.1535;-.3825,-3.5342,.569;-.3963,-3.0724,3.3301;-.6977,-4.5692,1.4573;-.0916,-2.2634,1.0747;-.0962,-2.0348,2.4464;-.6959,-4.3408,2.832;-.9039,-5.5725,1.0733;.1223,-1.4216,.4147;.1439,-1.0321,2.8098;-.9082,-5.166,3.5167;-.389,-2.8967,4.4098;1.2441,-1.7023,-3.9429;1.4309,-1.3123,-3.0429;.363,3.6753,-1.173;-2.1592,-2.9335,-1.6887;-2.9313,-3.1435,-.5418;-3.0987,-2.301,.4246;-3.824,-.7485,.7486;-4.8407,-.3242,-.7561;-2.5077,.4795,1.2053;-4.9045,-1.112,2.2303;-3.4223,-4.3589,-.3415;-4.1384,-4.6297,.8532;-4.213,-.1275,-1.6472;-5.4192,.5942,-.5612;-5.5519,-1.1352,-1.001;-1.6362,.5531,.5257;-2.1094,.2489,2.2113;-2.9877,1.4751,1.2543;-5.3513,-.1765,2.6135;-5.7279,-1.8044,1.989;-4.3051,-1.5565,3.0428;-5.0718,-4.0447,.8876;-3.5263,-4.4039,1.7392;-4.3743,-5.7009,.8154;4.2961,-2.1947,-.1587;4.1343,-3.2688,-1.0455;3.4714,-4.4261,-.6551;2.9803,-4.5057,.6428;3.1453,-3.4698,1.5575;3.7947,-2.3123,1.1467;4.4913,-3.1775,-2.0745;3.3127,-5.2478,-1.3543;2.2326,-5.696,1.0502;2.7399,-3.569,2.5655;3.8998,-1.4791,1.8434;-.5007,4.023,-.1254;-1.8651,3.7807,-.2115;-2.3629,3.1829,-1.3643;-1.5392,2.8598,-2.4396;-.1768,3.1088,-2.3373;-.0868,4.442,.7951;-2.5388,4.0225,.6111;-3.7885,2.8522,-1.4341;-1.9669,2.4032,-3.3328;.4814,2.8337,-3.1626;2.1372,-5.9299,2.234;1.7336,-6.3779,.1737;-4.2258,2.4381,-2.4868;-4.4533,2.9931,-.4226;6.7005,.1736,-1.9201;6.0166,1.4186,-1.8024;7.9081,.1069,-2.6685;8.4056,1.2166,-3.3052;8.4289,-.8531,-2.738;9.3325,1.1532,-3.8819;6.5407,2.5411,-2.5032;7.7024,2.443,-3.2308;6.0049,3.4916,-2.4662;8.0835,3.3195,-3.7624;4.5725,3.9183,-.2409;3.7405,5.0676,-.0993;5.9032,3.9879,.2595;6.3923,5.146,.8147;6.5404,3.1031,.2052;7.4179,5.1733,1.1936;4.2801,6.2562,.4657;5.579,6.3011,.9073;3.6332,7.1347,.5538;5.9823,7.2189,1.3441;-2.3988,-3.8431,-2.8777;-2.5689,-4.8903,-2.5843;-3.286,-3.5034,-3.4453;-1.5387,-3.81,-3.5649;-1.7237,-1.5359,-2.0367;-2.4715,-1.0411,-2.6938;-1.5495,-.8952,-1.1534;-.7787,-1.5694,-2.6091;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662646914689</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007864526962 0.001013787783 0.026987105013 0.005338067884</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.042451268 -0.005747735 0.000118179 0.000193149 0.000256178 0.000293979 0.000330601 0.000396484 0.000429840 0.000527773 0.000643414 0.000768965 0.000793682 0.000852456 0.000923715 0.001045422 0.001156053 0.001201973 0.001250016 0.001292689 0.001424298 0.001456672 0.001510589 0.001610864 0.001756583 0.001971282 0.002093089 0.002206127 0.002766297 0.003039134 0.003337460 0.003947735 0.004144957 0.004327561 0.004653442 0.004844269 0.005344457 0.005588754 0.006141018 0.006631018 0.006840481 0.006993660 0.007416543 0.008000242 0.008258420 0.008734717 0.009257469 0.009593165 0.010173219 0.010299135 0.011611735 0.012524511 0.012792321 0.013391282 0.014312611 0.014609701 0.014841803 0.015336350 0.015843263 0.016029526 0.016389212 0.017083594 0.017821646 0.018682820 0.018935338 0.020358858 0.021084224 0.022206610 0.023028765 0.023341458 0.024329199 0.024624701 0.025654690 0.025976136 0.026503692 0.026732367 0.027763458 0.029755074 0.030418290 0.031096165 0.032035611 0.032672362 0.033198469 0.036159066 0.038235048 0.039311287 0.039653406 0.040331189 0.040841798 0.041277346 0.043768959 0.045268261 0.046139185 0.046373117 0.049669257 0.050667637 0.051372195 0.051573236 0.051801150 0.052281766 0.052387989 0.052537963 0.053827406 0.054725190 0.054931430 0.056495024 0.056842638 0.056994046 0.057294746 0.057710113 0.058527610 0.059220541 0.059557405 0.060252179 0.060461007 0.061364760 0.061497097 0.061863928 0.064556917 0.064734994 0.065581787 0.067748425 0.068253404 0.069589389 0.071837082 0.072663479 0.076462161 0.078160643 0.080374633 0.081370453 0.082259005 0.087198789 0.089480152 0.090818294 0.092838043 0.093311610 0.094204775 0.095259860 0.095362697 0.096415980 0.096495451 0.097275990 0.098482326 0.099444105 0.100570891 0.101224971 0.102412740 0.102615051 0.103607185 0.103819390 0.104373713 0.106774878 0.107960652 0.108292829 0.109035597 0.110272460 0.112546067 0.113296821 0.115973504 0.116483883 0.117307457 0.119604421 0.122942884 0.126121001 0.127477638 0.128513259 0.129949338 0.132311084 0.133220431 0.135192631 0.136681377 0.142103820 0.143639962 0.144583722 0.145730804 0.146697335 0.152523356 0.154823486 0.157286311 0.159658573 0.170417556 0.173494287 0.174863482 0.176000460 0.180475902 0.183227989 0.185590232 0.188009197 0.188476573 0.194640516 0.201745347 0.204735680 0.205064267 0.206781012 0.207147800 0.209055648 0.210648923 0.212652656 0.214146288 0.215526561 0.217479101 0.224804895 0.231496466 0.232610442 0.233590479 0.235077827 0.244465836 0.248143963 0.254493127 0.255072327 0.256701977 0.258804647 0.271368145 0.277426291 0.290030708 0.296163001 0.297452352 0.299345009 0.304115569 0.306151499 0.307526431 0.312871689 0.320555588 0.322762061 0.325168730 0.328798633 0.345565082 0.349677307 0.350665733 0.354692166 0.358918485 0.363798556 0.370938417 0.380547094 0.389856971 0.398470823 0.405918426 0.427121534 0.430101194 0.444446566 0.463353755 0.463773263 0.476557293 0.477883122 0.479496669 0.482353574 0.498022688 0.509407966 0.542097894 0.564363144 0.566754214 0.577064274 0.583289073 0.604269609 0.626875888 0.643350229 0.646216543 0.665317915 0.671349854 0.681302039 0.681322680 0.691586396 0.692583016 0.704240569 0.705257424 0.714001770 0.719357377 0.737192669 0.750679789 0.771573632 0.775836418 0.798391255 0.814556968 0.816576792 0.819690170 0.820419163 0.823106250 0.830836031 0.831453090 0.832613494 0.840524085 0.844560591 0.848708724 0.853562016 0.856542304 0.859376493 0.867338656 0.872036436 0.875857989 0.886836765 0.888091493 0.893663565 0.914661600 0.918686525 0.923914718 0.931130364 0.934054525 0.957349244 0.958370939 0.969253442 0.975847554 0.989157396 0.999615711 1.012943519 1.034022349 1.042609613 1.049184062 1.055220392 1.073026502 1.084186940 1.088647635 1.109990537 1.110585137 1.116116752 1.122411829 1.123318599 1.134045560 1.142383221 1.161162282 1.168739413 1.172583962 1.173230438 1.200402447 1.204200401 1.215106247 1.247262019 1.291424212 1.295616816 1.301822727 1.314420383 1.326276685 1.326813031 1.330137255 1.334425685 1.340916826 1.345767355 1.362017120 1.363349524 1.378772332 1.380882408 1.381285363 1.384825541 1.557433408 1.671842756 1.785319939</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">49</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94988669" y3="-0.95192811" z3="-0.6434237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.65774245" y3="-1.94505585" z3="-1.46279444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1372956" y3="-0.99072532" z3="-1.33616618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.81206809" y3="1.48047374" z3="-1.0250234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.31204293" y3="0.3120157" z3="-0.47586885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68860551" y3="2.72521432" z3="-1.1922252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02713405" y3="2.73492025" z3="-0.84113199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37297099" y3="4.99183629" z3="-0.46206374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82566714" y3="3.83813292" z3="-0.97216614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73662966" y3="5.86765078" z3="-0.30115958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14829008" y3="1.58991394" z3="-1.72169643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13257418" y3="0.35240158" z3="0.21048819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74194216" y3="0.37120345" z3="-0.68373402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6134328" y3="0.72819649" z3="0.21229941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.71460625" y3="-0.87403239" z3="-1.54187553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08356795" y3="-2.46538972" z3="-1.35555416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85939062" y3="-5.44279659" z3="-6.35744602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62270615" y3="-5.01431204" z3="-5.37933674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99666127" y3="-3.88943405" z3="-2.89564867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59578054" y3="-3.63447019" z3="-5.22231327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36755479" y3="-5.84768496" z3="-4.28767113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06860642" y3="-5.27923416" z3="-3.05542663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29240255" y3="-3.04103495" z3="-3.98707253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80302678" y3="-2.96203258" z3="-6.05841317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.41426436" y3="-6.93478015" z3="-4.3902774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90461938" y3="-5.91733503" z3="-2.18286218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62253579" y3="-3.34813472" z3="-1.63921664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.37500989" y3="-3.82365472" z3="-0.88318984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.72629715" y3="-4.82449867" z3="-1.15041531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38230606" y3="-3.53263829" z3="0.56922182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39349033" y3="-3.06820505" z3="3.33074219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69306996" y3="-4.56788788" z3="1.45966462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09322945" y3="-2.26107168" z3="1.07367647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.096774" y3="-2.03089548" z3="2.44521506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69026849" y3="-4.33805024" z3="2.83439843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89690903" y3="-5.57254653" z3="1.07737862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11862603" y3="-1.41961218" z3="0.4127898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14137556" y3="-1.02691777" z3="2.80709116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89964634" y3="-5.16327207" z3="3.52043147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38562137" y3="-2.89124005" z3="4.4102527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24595628" y3="-1.70488256" z3="-3.94340859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43036395" y3="-1.31361845" z3="-3.04358453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36176836" y3="3.679084" z3="-1.16674406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15453001" y3="-2.94074097" z3="-1.68824202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92960174" y3="-3.14634881" z3="-0.54076507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09830382" y3="-2.30252817" z3="0.42300368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82188021" y3="-0.74620484" z3="0.74139409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.82853017" y3="-0.3209683" z3="-0.76959531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50700693" y3="0.4788066" z3="1.20559133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.91571123" y3="-1.10922204" z3="2.21591389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42088399" y3="-4.35882779" z3="-0.33973421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13339289" y3="-4.63010487" z3="0.85846988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.20510742" y3="-0.11656104" z3="-1.65406866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41827467" y3="0.5942752" z3="-0.57555611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.53463414" y3="-1.13317242" z3="-1.02435228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63567211" y3="0.54986454" z3="0.53069141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1149399" y3="0.24914499" z3="2.20979775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98596538" y3="1.47547026" z3="1.24849646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.36244032" y3="-0.17505042" z3="2.59857914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.74337096" y3="-1.79801361" z3="1.96205508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.32557025" y3="-1.55947276" z3="3.03711433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06835966" y3="-4.04679058" z3="0.89282615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51818519" y3="-4.39965939" z3="1.74264042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36683016" y3="-5.70312511" z3="0.82499272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29360375" y3="-2.19525662" z3="-0.16110565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13392101" y3="-3.2709415" z3="-1.04630346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47265362" y3="-4.42875414" z3="-0.65453995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9811085" y3="-4.50717247" z3="0.64324043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14397046" y3="-3.4696144" z3="1.55645519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79171904" y3="-2.31176459" z3="1.14426966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49119482" y3="-3.18074148" z3="-2.07536322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.31560812" y3="-5.25173991" z3="-1.35262812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23489206" y3="-5.69796567" z3="1.05208723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73822695" y3="-3.56790694" z3="2.56439297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89509971" y3="-1.47726818" z3="1.83979167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50029402" y3="4.02521416" z3="-0.11722484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.865037" y3="3.78455444" z3="-0.20205308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36464769" y3="3.18986654" z3="-1.35533419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.54287524" y3="2.86917059" z3="-2.4331616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18005361" y3="3.11629672" z3="-2.33197225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08491276" y3="4.4417447" z3="0.80360018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53782423" y3="4.02561173" z3="0.6212753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79114299" y3="2.86210796" z3="-1.42527424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.9724818" y3="2.41665854" z3="-3.32790456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.47692935" y3="2.84271157" z3="-3.15902616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14034392" y3="-5.93089154" z3="2.23616308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.73621979" y3="-6.38121956" z3="0.17651636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.23054581" y3="2.45234836" z3="-2.47731917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45560867" y3="3.00318252" z3="-0.41770923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.69609353" y3="0.17309443" z3="-1.92503814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.01273851" y3="1.41822594" z3="-1.80612804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.90290302" y3="0.10628826" z3="-2.67471643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.40020074" y3="1.21623829" z3="-3.31126253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.42333366" y3="-0.85382243" z3="-2.74518486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.32657255" y3="1.15278143" z3="-3.88887013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53655862" y3="2.54092408" z3="-2.50677708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.69761059" y3="2.4428289" z3="-3.23545799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00111505" y3="3.49160256" z3="-2.46871669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.07853049" y3="3.31948962" z3="-3.76695579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57262166" y3="3.91702521" z3="-0.23997354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74175473" y3="5.06664399" z3="-0.0951164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90416337" y3="3.98472715" z3="0.25843931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39499131" y3="5.14152435" z3="0.81478639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54069378" y3="3.09956108" z3="0.20141588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42121602" y3="5.16745557" z3="1.19205785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28302141" y3="6.25394248" z3="0.47105404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58273923" y3="6.29703561" z3="0.91068656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63698519" y3="7.13267366" z3="0.56164731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98736382" y3="7.21384089" z3="1.34842117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39622615" y3="-3.85239439" z3="-2.87524114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56514808" y3="-4.89896473" z3="-2.57971311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28376925" y3="-3.51406715" z3="-3.44221834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53664798" y3="-3.81993279" z3="-3.56326536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7239785" y3="-1.5411677" z3="-2.04132749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47012968" y3="-1.04469844" z3="-2.67496172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5373146" y3="-0.91033738" z3="-1.16585029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78967917" y3="-1.56852427" z3="-2.61963763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9499,-.9519,-.6434;6.6577,-1.9451,-1.4628;6.1373,-.9907,-1.3362;4.8121,1.4805,-1.025;4.312,.312,-.4759;2.6886,2.7252,-1.1922;4.0271,2.7349,-.8411;2.373,4.9918,-.4621;1.8257,3.8381,-.9722;1.7366,5.8677,-.3012;2.1483,1.5899,-1.7217;3.1326,.3524,.2105;1.7419,.3712,-.6837;.6134,.7282,.2123;1.7146,-.874,-1.5419;1.0836,-2.4654,-1.3556;1.8594,-5.4428,-6.3574;1.6227,-5.0143,-5.3793;.9967,-3.8894,-2.8956;1.5958,-3.6345,-5.2223;1.3676,-5.8477,-4.2877;1.0686,-5.2792,-3.0554;1.2924,-3.041,-3.9871;1.803,-2.962,-6.0584;1.4143,-6.9348,-4.3903;.9046,-5.9173,-2.1829;.6225,-3.3481,-1.6392;-.375,-3.8237,-.8832;-.7263,-4.8245,-1.1504;-.3823,-3.5326,.5692;-.3935,-3.0682,3.3307;-.6931,-4.5679,1.4597;-.0932,-2.2611,1.0737;-.0968,-2.0309,2.4452;-.6903,-4.3381,2.8344;-.8969,-5.5725,1.0774;.1186,-1.4196,.4128;.1414,-1.0269,2.8071;-.8996,-5.1633,3.5204;-.3856,-2.8912,4.4103;1.246,-1.7049,-3.9434;1.4304,-1.3136,-3.0436;.3618,3.6791,-1.1667;-2.1545,-2.9407,-1.6882;-2.9296,-3.1463,-.5408;-3.0983,-2.3025,.423;-3.8219,-.7462,.7414;-4.8285,-.321,-.7696;-2.507,.4788,1.2056;-4.9157,-1.1092,2.2159;-3.4209,-4.3588,-.3397;-4.1334,-4.6301,.8585;-4.2051,-.1166,-1.6541;-5.4183,.5943,-.5756;-5.5346,-1.1332,-1.0244;-1.6357,.5499,.5307;-2.1149,.2491,2.2098;-2.986,1.4755,1.2485;-5.3624,-.1751,2.5986;-5.7434,-1.798,1.9621;-4.3256,-1.5595,3.0371;-5.0684,-4.0468,.8928;-3.5182,-4.3997,1.7426;-4.3668,-5.7031,.825;4.2936,-2.1953,-.1611;4.1339,-3.2709,-1.0463;3.4727,-4.4288,-.6545;2.9811,-4.5072,.6432;3.144,-3.4696,1.5565;3.7917,-2.3118,1.1443;4.4912,-3.1807,-2.0754;3.3156,-5.2517,-1.3526;2.2349,-5.698,1.0521;2.7382,-3.5679,2.5644;3.8951,-1.4773,1.8398;-.5003,4.0252,-.1172;-1.865,3.7846,-.2021;-2.3646,3.1899,-1.3553;-1.5429,2.8692,-2.4332;-.1801,3.1163,-2.332;-.0849,4.4417,.8036;-2.5378,4.0256,.6213;-3.7911,2.8621,-1.4253;-1.9725,2.4167,-3.3279;.4769,2.8427,-3.159;2.1403,-5.9309,2.2362;1.7362,-6.3812,.1765;-4.2305,2.4523,-2.4773;-4.4556,3.0032,-.4177;6.6961,.1731,-1.925;6.0127,1.4182,-1.8061;7.9029,.1063,-2.6747;8.4002,1.2162,-3.3113;8.4233,-.8538,-2.7452;9.3266,1.1528,-3.8889;6.5366,2.5409,-2.5068;7.6976,2.4428,-3.2355;6.0011,3.4916,-2.4687;8.0785,3.3195,-3.767;4.5726,3.917,-.24;3.7418,5.0666,-.0951;5.9042,3.9847,.2584;6.395,5.1415,.8148;6.5407,3.0996,.2014;7.4212,5.1675,1.1921;4.283,6.2539,.4711;5.5827,6.297,.9107;3.637,7.1327,.5616;5.9874,7.2138,1.3484;-2.3962,-3.8524,-2.8752;-2.5651,-4.899,-2.5797;-3.2838,-3.5141,-3.4422;-1.5366,-3.8199,-3.5633;-1.724,-1.5412,-2.0413;-2.4701,-1.0447,-2.675;-1.5373,-.9103,-1.1659;-.7897,-1.5685,-2.6196;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662677811451</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007267437949 0.000960570330 0.031707216150 0.005337698125</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043006139 -0.004848024 0.000117619 0.000194801 0.000258370 0.000294915 0.000330611 0.000396430 0.000429886 0.000529323 0.000643954 0.000770903 0.000793660 0.000855459 0.000924285 0.001045495 0.001156220 0.001202232 0.001252744 0.001292839 0.001424696 0.001457699 0.001515299 0.001610723 0.001757254 0.001985250 0.002149237 0.002289633 0.002887432 0.003039309 0.003359005 0.003951134 0.004217217 0.004331249 0.004660312 0.004877573 0.005347087 0.005589792 0.006140973 0.006680465 0.006902821 0.007193546 0.007437470 0.008020040 0.008334854 0.008737208 0.009279716 0.009685126 0.010182523 0.010295393 0.012523078 0.012775312 0.013326161 0.013986340 0.014324326 0.014738060 0.014841768 0.015347311 0.016015710 0.016079005 0.016390108 0.017235972 0.017828542 0.018732508 0.018934376 0.020358919 0.021106075 0.022207350 0.023028916 0.023341487 0.024425836 0.024683764 0.025669802 0.025976117 0.026506576 0.026736467 0.027763605 0.029779065 0.030421105 0.031367986 0.032056994 0.032710710 0.033580066 0.036175325 0.038240118 0.039315481 0.039708900 0.040339912 0.040853368 0.041374617 0.043766665 0.045268231 0.046143642 0.046476064 0.049669285 0.050668229 0.051372335 0.051573324 0.051802605 0.052281765 0.052388028 0.052539497 0.053829037 0.054729686 0.054998660 0.056495394 0.056842901 0.056999917 0.057299869 0.057759341 0.058538352 0.059220652 0.059531184 0.060423431 0.060539994 0.061368790 0.061510362 0.062075759 0.064557129 0.064735063 0.065619539 0.067765347 0.068314522 0.069693754 0.071837092 0.072663701 0.076462057 0.078164273 0.080375553 0.081405711 0.082259146 0.087203191 0.089480353 0.090818152 0.092838309 0.093313810 0.094204828 0.095260159 0.095364034 0.096420943 0.096495548 0.097275902 0.098519391 0.099444071 0.100555019 0.101225044 0.102417285 0.102619609 0.103677424 0.103822210 0.104494535 0.106821315 0.108077439 0.108311905 0.109395626 0.110283419 0.112548723 0.113362475 0.115981161 0.116486517 0.117308883 0.120038548 0.122943324 0.126124855 0.127484002 0.128515005 0.129970678 0.132339799 0.133219613 0.135192532 0.136682949 0.142104603 0.143836293 0.144607576 0.145732041 0.146697978 0.152523888 0.154770417 0.157287911 0.160099885 0.170417971 0.173512500 0.174831338 0.176003454 0.180477993 0.183229961 0.185592064 0.188016618 0.188478020 0.195241340 0.201762870 0.204860553 0.205098087 0.206782217 0.207148832 0.209056146 0.210648866 0.212656651 0.214519327 0.215555802 0.218573840 0.224806810 0.231502481 0.232646306 0.233590477 0.235077822 0.244466562 0.248294232 0.254499854 0.255136997 0.256703884 0.258805187 0.271368496 0.277427696 0.290034011 0.296168157 0.297453731 0.299346265 0.304115561 0.306154042 0.307527611 0.314060313 0.320561251 0.322770359 0.325699711 0.328804114 0.345578882 0.350027615 0.350696123 0.354692664 0.359022810 0.363798539 0.371193989 0.380553088 0.390023061 0.398808463 0.406014567 0.427718551 0.430106629 0.444571029 0.463601121 0.463789014 0.477541025 0.477885080 0.481438403 0.482380446 0.498022893 0.509441084 0.542125397 0.564406505 0.566754241 0.577253237 0.583289240 0.604275540 0.628276246 0.643363721 0.646219176 0.665319605 0.671365759 0.681321511 0.681420882 0.691593633 0.695282292 0.704240570 0.705262088 0.714005908 0.719386511 0.737194830 0.750679823 0.771573634 0.775836628 0.799082504 0.814632260 0.817071375 0.819887093 0.820479872 0.823106327 0.830923841 0.832026302 0.835833944 0.840552456 0.844592319 0.848787558 0.854593796 0.857134937 0.859381339 0.867339854 0.872038684 0.875864236 0.887067846 0.888623178 0.893663800 0.915097056 0.918975419 0.923915314 0.931147181 0.934068314 0.957447492 0.958381533 0.969308819 0.975847783 0.989174502 0.999615896 1.012948556 1.034023585 1.042609660 1.049190626 1.055222679 1.073041453 1.084187511 1.088648403 1.109990545 1.110585253 1.116122120 1.122411829 1.123318599 1.134059494 1.142428912 1.161168223 1.168739490 1.172585435 1.173230762 1.200402460 1.204200401 1.215166523 1.247262054 1.291429164 1.295633252 1.302319974 1.314429206 1.326276697 1.326813045 1.330137193 1.334426530 1.340919436 1.345771684 1.362017464 1.364535165 1.378772310 1.380883080 1.381285711 1.384847719 1.557434356 1.671842760 1.785479127</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">50</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94655022" y3="-0.95244646" z3="-0.64708611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.65338942" y3="-1.94559847" z3="-1.4686551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.13313586" y3="-0.99126241" z3="-1.34130856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80912287" y3="1.4801332" z3="-1.02750492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30918413" y3="0.31160149" z3="-0.47845844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68637749" y3="2.72673013" z3="-1.19021548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02542284" y3="2.73493769" z3="-0.84114436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37361773" y3="4.99235367" z3="-0.45572858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82465368" y3="3.83997215" z3="-0.96707589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73815606" y3="5.86834336" z3="-0.292308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14445279" y3="1.59241166" z3="-1.72049363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1304635" y3="0.35218185" z3="0.20918039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73875631" y3="0.37287434" z3="-0.68340164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61153259" y3="0.72953923" z3="0.21430227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70961087" y3="-0.87194347" z3="-1.54238191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08475353" y3="-2.46497625" z3="-1.35478675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.86462347" y3="-5.44686842" z3="-6.35372535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62720938" y3="-5.01764037" z3="-5.37612301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99948985" y3="-3.89102065" z3="-2.89402735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59963955" y3="-3.63773508" z3="-5.2203424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37174579" y3="-5.85027889" z3="-4.28392478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07183022" y3="-5.28093982" z3="-3.05242575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29547586" y3="-3.04321983" z3="-3.9857273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80714705" y3="-2.9659356" z3="-6.05686794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.41891324" y3="-6.9374216" z3="-4.38557543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90777413" y3="-5.91847512" z3="-2.17946706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62478626" y3="-3.34880046" z3="-1.63793186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36707735" y3="-3.82898925" z3="-0.87850592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.72176251" y3="-4.82704148" z3="-1.14774027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37868914" y3="-3.53325359" z3="0.57175073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39151548" y3="-3.06503113" z3="3.33166414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68836675" y3="-4.56760874" z3="1.46257128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09355059" y3="-2.25966058" z3="1.07414177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09755474" y3="-2.02784561" z3="2.44522851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68595208" y3="-4.33597614" z3="2.83684369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89055771" y3="-5.57260486" z3="1.0809773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11530447" y3="-1.41837166" z3="0.4116368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13788601" y3="-1.02275699" z3="2.80588091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89378347" y3="-5.16067243" z3="3.52352132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3838308" y3="-2.88679424" z3="4.41090173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24883189" y3="-1.70722101" z3="-3.94352548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43043362" y3="-1.31431749" z3="-3.0437436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.36033866" y3="3.68273923" z3="-1.16023856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15711035" y3="-2.94232867" z3="-1.6886671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92865175" y3="-3.14808472" z3="-0.54111197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09680144" y3="-2.30330276" z3="0.4227297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82153972" y3="-0.74645361" z3="0.73213183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.82007241" y3="-0.31859619" z3="-0.78247271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50761824" y3="0.47793797" z3="1.20340267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.92669288" y3="-1.10615608" z3="2.2009444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41889715" y3="-4.3618314" z3="-0.33603231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12882111" y3="-4.63012562" z3="0.86367122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.20037013" y3="-0.11419878" z3="-1.6645642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.4110353" y3="0.59760724" z3="-0.59272834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.52130623" y3="-1.13067025" z3="-1.03315654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63057681" y3="0.5474187" z3="0.5347407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.12404043" y3="0.24938775" z3="2.21393096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98492145" y3="1.47383313" z3="1.24320468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.37380693" y3="-0.16730635" z3="2.57813116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.7517817" y3="-1.79247559" z3="1.94767122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.34097305" y3="-1.55555832" z3="3.02134687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06565" y3="-4.04916908" z3="0.89798003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5128596" y3="-4.39575964" z3="1.74604811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35996236" y3="-5.70372221" z3="0.83375794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29125805" y3="-2.19583298" z3="-0.16362064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13358238" y3="-3.27307624" z3="-1.04729659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47410057" y3="-4.43141003" z3="-0.65405635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98203742" y3="-4.50869645" z3="0.64360566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14285988" y3="-3.46954316" z3="1.55535029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78900919" y3="-2.31132216" z3="1.14175556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49120105" y3="-3.18395021" z3="-2.07633258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.31883641" y3="-5.25574278" z3="-1.35095667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23737609" y3="-5.69995625" z3="1.0537779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73677576" y3="-3.56692798" z3="2.56324796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89085541" y3="-1.4757563" z3="1.83617381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50018386" y3="4.02679998" z3="-0.10880014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86537587" y3="3.78812032" z3="-0.19304605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36734558" y3="3.19847276" z3="-1.348468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.54677604" y3="2.87939547" z3="-2.4273394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18338956" y3="3.1239068" z3="-2.32644078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08324168" y3="4.44028371" z3="0.81277882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53673907" y3="4.02727724" z3="0.63222432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79427613" y3="2.87219853" z3="-1.41763532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.97756742" y3="2.42960692" z3="-3.32242582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.47254436" y3="2.85160816" z3="-3.1546888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1436286" y3="-5.93210339" z3="2.23804084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.73880739" y3="-6.38421971" z3="0.17884217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.23712912" y3="2.47396283" z3="-2.47410229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45468455" y3="3.00124993" z3="-0.40232906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.69151652" y3="0.17257469" z3="-1.93050974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00876279" y3="1.41787715" z3="-1.8101297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.89742386" y3="0.10576026" z3="-2.6816491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.39437061" y3="1.21591809" z3="-3.31810186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.41745287" y3="-0.85448157" z3="-2.75327021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.32006441" y3="1.15248305" z3="-3.89679627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53215674" y3="2.54083238" z3="-2.51067719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.69233267" y3="2.44274067" z3="-3.24074604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99708583" y3="3.49167681" z3="-2.47138016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.07299669" y3="3.31958007" z3="-3.77213133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57282808" y3="3.91566019" z3="-0.23899031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74301867" y3="5.06557792" z3="-0.09072265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90529321" y3="3.98156495" z3="0.25719647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39787734" y3="5.13702063" z3="0.81477386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54116185" y3="3.09611686" z3="0.19734265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42479937" y3="5.16159462" z3="1.19023203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28604739" y3="6.2514642" z3="0.47674933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58654729" y3="6.29287233" z3="0.91424199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64077824" y3="7.13047405" z3="0.57008735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.99254247" y3="7.20859696" z3="1.35298017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39417145" y3="-3.85867244" z3="-2.87296674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56210216" y3="-4.90468895" z3="-2.57423439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28172106" y3="-3.52392895" z3="-3.44255392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53395772" y3="-3.82774502" z3="-3.56004538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72361592" y3="-1.54619619" z3="-2.04338972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47119128" y3="-1.0581004" z3="-2.70666894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55332382" y3="-0.89857281" z3="-1.16450563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77895361" y3="-1.57923343" z3="-2.6135504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9466,-.9524,-.6471;6.6534,-1.9456,-1.4687;6.1331,-.9913,-1.3413;4.8091,1.4801,-1.0275;4.3092,.3116,-.4785;2.6864,2.7267,-1.1902;4.0254,2.7349,-.8411;2.3736,4.9924,-.4557;1.8247,3.84,-.9671;1.7382,5.8683,-.2923;2.1445,1.5924,-1.7205;3.1305,.3522,.2092;1.7388,.3729,-.6834;.6115,.7295,.2143;1.7096,-.8719,-1.5424;1.0848,-2.465,-1.3548;1.8646,-5.4469,-6.3537;1.6272,-5.0176,-5.3761;.9995,-3.891,-2.894;1.5996,-3.6377,-5.2203;1.3717,-5.8503,-4.2839;1.0718,-5.2809,-3.0524;1.2955,-3.0432,-3.9857;1.8071,-2.9659,-6.0569;1.4189,-6.9374,-4.3856;.9078,-5.9185,-2.1795;.6248,-3.3488,-1.6379;-.3671,-3.829,-.8785;-.7218,-4.827,-1.1477;-.3787,-3.5333,.5718;-.3915,-3.065,3.3317;-.6884,-4.5676,1.4626;-.0936,-2.2597,1.0741;-.0976,-2.0278,2.4452;-.686,-4.336,2.8368;-.8906,-5.5726,1.081;.1153,-1.4184,.4116;.1379,-1.0228,2.8059;-.8938,-5.1607,3.5235;-.3838,-2.8868,4.4109;1.2488,-1.7072,-3.9435;1.4304,-1.3143,-3.0437;.3603,3.6827,-1.1602;-2.1571,-2.9423,-1.6887;-2.9287,-3.1481,-.5411;-3.0968,-2.3033,.4227;-3.8215,-.7465,.7321;-4.8201,-.3186,-.7825;-2.5076,.4779,1.2034;-4.9267,-1.1062,2.2009;-3.4189,-4.3618,-.336;-4.1288,-4.6301,.8637;-4.2004,-.1142,-1.6646;-5.411,.5976,-.5927;-5.5213,-1.1307,-1.0332;-1.6306,.5474,.5347;-2.124,.2494,2.2139;-2.9849,1.4738,1.2432;-5.3738,-.1673,2.5781;-5.7518,-1.7925,1.9477;-4.341,-1.5556,3.0213;-5.0656,-4.0492,.898;-3.5129,-4.3958,1.746;-4.36,-5.7037,.8338;4.2913,-2.1958,-.1636;4.1336,-3.2731,-1.0473;3.4741,-4.4314,-.6541;2.982,-4.5087,.6436;3.1429,-3.4695,1.5554;3.789,-2.3113,1.1418;4.4912,-3.184,-2.0763;3.3188,-5.2557,-1.351;2.2374,-5.7,1.0538;2.7368,-3.5669,2.5632;3.8909,-1.4758,1.8362;-.5002,4.0268,-.1088;-1.8654,3.7881,-.193;-2.3673,3.1985,-1.3485;-1.5468,2.8794,-2.4273;-.1834,3.1239,-2.3264;-.0832,4.4403,.8128;-2.5367,4.0273,.6322;-3.7943,2.8722,-1.4176;-1.9776,2.4296,-3.3224;.4725,2.8516,-3.1547;2.1436,-5.9321,2.238;1.7388,-6.3842,.1788;-4.2371,2.474,-2.4741;-4.4547,3.0012,-.4023;6.6915,.1726,-1.9305;6.0088,1.4179,-1.8101;7.8974,.1058,-2.6816;8.3944,1.2159,-3.3181;8.4175,-.8545,-2.7533;9.3201,1.1525,-3.8968;6.5322,2.5408,-2.5107;7.6923,2.4427,-3.2407;5.9971,3.4917,-2.4714;8.073,3.3196,-3.7721;4.5728,3.9157,-.239;3.743,5.0656,-.0907;5.9053,3.9816,.2572;6.3979,5.137,.8148;6.5412,3.0961,.1973;7.4248,5.1616,1.1902;4.286,6.2515,.4767;5.5865,6.2929,.9142;3.6408,7.1305,.5701;5.9925,7.2086,1.353;-2.3942,-3.8587,-2.873;-2.5621,-4.9047,-2.5742;-3.2817,-3.5239,-3.4426;-1.534,-3.8277,-3.56;-1.7236,-1.5462,-2.0434;-2.4712,-1.0581,-2.7067;-1.5533,-.8986,-1.1645;-.779,-1.5792,-2.6136;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662697030357</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007143024765 0.000930931991 0.037847842361 0.005337006650</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043391287 -0.005095430 0.000124898 0.000194440 0.000258341 0.000295184 0.000330611 0.000396420 0.000429993 0.000529863 0.000644054 0.000770632 0.000793807 0.000855975 0.000935135 0.001046682 0.001165760 0.001202228 0.001254465 0.001295497 0.001426538 0.001458660 0.001515525 0.001620433 0.001758188 0.001984394 0.002160832 0.002378551 0.003039204 0.003117175 0.003435808 0.003953381 0.004261849 0.004332955 0.004694476 0.004987837 0.005347852 0.005590219 0.006141644 0.006710834 0.006902597 0.007399175 0.007620969 0.008083661 0.008484547 0.008748524 0.009288289 0.009738784 0.010190908 0.010357644 0.012523285 0.012774627 0.013351890 0.014288615 0.014431746 0.014841419 0.015056982 0.015384177 0.016023741 0.016292245 0.016394176 0.017666702 0.018066477 0.018848456 0.019095373 0.020360349 0.021143676 0.022208055 0.023028838 0.023346918 0.024518606 0.024922054 0.025792652 0.025976735 0.026536679 0.026756178 0.027764325 0.029787526 0.030422749 0.031493050 0.032059242 0.032725535 0.033798662 0.036173539 0.038249769 0.039326681 0.039702882 0.040343136 0.040851790 0.041471465 0.044115471 0.045273314 0.046149292 0.046949605 0.049669288 0.050669729 0.051373373 0.051573554 0.051804482 0.052281766 0.052388244 0.052551075 0.053831193 0.054735578 0.055300503 0.056495412 0.056842894 0.056999683 0.057299368 0.057762077 0.058541958 0.059220618 0.059572742 0.060440601 0.060620478 0.061388945 0.061535425 0.062294849 0.064557526 0.064740245 0.065651873 0.067779331 0.068314998 0.069689937 0.071837089 0.072663792 0.076462545 0.078164135 0.080392893 0.081407425 0.082260067 0.087206181 0.089480437 0.090818225 0.092838492 0.093314594 0.094204898 0.095260132 0.095366452 0.096420553 0.096498988 0.097276321 0.098536584 0.099444081 0.100663115 0.101226564 0.102417485 0.102627535 0.103704910 0.103821693 0.104484915 0.106851622 0.108161109 0.108313170 0.109761775 0.110302430 0.112553201 0.113472838 0.115980378 0.116486653 0.117309124 0.120355692 0.122944819 0.126133213 0.127508825 0.128525931 0.130067612 0.132339177 0.133225661 0.135210523 0.136682925 0.142104676 0.143898311 0.144619712 0.145731481 0.146697224 0.152523406 0.155372222 0.157288350 0.160909544 0.170418240 0.173796919 0.175179070 0.176007404 0.180478368 0.183233416 0.185591613 0.188020751 0.188479440 0.195719115 0.201776587 0.204926985 0.205146622 0.206782213 0.207149880 0.209057181 0.210650792 0.212665999 0.214505867 0.215558257 0.219350206 0.224807949 0.231507246 0.232668815 0.233590476 0.235077889 0.244466516 0.248476254 0.254503004 0.255200539 0.256705368 0.258805142 0.271368517 0.277429430 0.290035197 0.296168267 0.297466092 0.299347948 0.304115613 0.306156208 0.307529686 0.314403370 0.320563482 0.322773754 0.325946752 0.328805367 0.345582991 0.350102024 0.350706704 0.354692623 0.359083592 0.363798860 0.371516249 0.380570769 0.390071504 0.399050215 0.406100816 0.428090381 0.430113749 0.444699152 0.463699526 0.463831214 0.477782944 0.477892020 0.482295817 0.483785513 0.498022994 0.509478745 0.542147544 0.564442873 0.566754405 0.577427176 0.583289166 0.604281196 0.630340638 0.643379408 0.646253009 0.665319549 0.671377170 0.681325871 0.681642950 0.691601789 0.696666239 0.704240579 0.705266767 0.714018173 0.719388449 0.737197345 0.750679836 0.771573634 0.775836717 0.800006543 0.814733091 0.817136274 0.819894165 0.820479250 0.823679888 0.830925652 0.833505979 0.839897190 0.840778150 0.844727264 0.848845328 0.854856345 0.857608741 0.859597576 0.867340444 0.872041223 0.875865937 0.887099230 0.888907440 0.893663791 0.915137003 0.919004411 0.923915324 0.931158188 0.934070092 0.957728070 0.958409028 0.969333196 0.975847769 0.989190648 0.999616197 1.012958375 1.034025016 1.042609725 1.049200391 1.055227341 1.073159491 1.084187906 1.088648416 1.109990549 1.110585289 1.116122057 1.122411831 1.123318591 1.134065433 1.142445748 1.161171124 1.168739491 1.172591318 1.173230849 1.200402525 1.204200593 1.215272176 1.247262272 1.291428866 1.295642470 1.302710184 1.314436862 1.326276718 1.326813057 1.330137137 1.334426603 1.340922931 1.345773768 1.362017587 1.365341584 1.378772336 1.380883376 1.381286051 1.384866674 1.557436731 1.671842829 1.785615084</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">51</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94315716" y3="-0.95281151" z3="-0.65057948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.64886332" y3="-1.94607032" z3="-1.47444637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12884962" y3="-0.99169802" z3="-1.34640069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80617576" y3="1.47993129" z3="-1.03008784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3063672" y3="0.31141914" z3="-0.48091672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68412997" y3="2.72836834" z3="-1.1883219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02371134" y3="2.73511729" z3="-0.84132317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37410331" y3="4.99298483" z3="-0.44949858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82357794" y3="3.84188626" z3="-0.96204722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73948099" y3="5.86910525" z3="-0.28359686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14056784" y3="1.59517075" z3="-1.71925165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12854349" y3="0.35256429" z3="0.20818038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7357748" y3="0.37470652" z3="-0.6827548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60986054" y3="0.73140405" z3="0.21662336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7051863" y3="-0.86935242" z3="-1.54250048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08466589" y3="-2.46459169" z3="-1.35431339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87048829" y3="-5.45156791" z3="-6.34934904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63223436" y3="-5.02148491" z3="-5.37232905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00225796" y3="-3.89258515" z3="-2.89154083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60412867" y3="-3.64143364" z3="-5.21781714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37614577" y3="-5.85312272" z3="-4.27951905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07523631" y3="-5.28263602" z3="-3.04878484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29869165" y3="-3.04582909" z3="-3.9840385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81203286" y3="-2.97036902" z3="-6.05485608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.42365431" y3="-6.9403735" z3="-4.38003964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91075134" y3="-5.91940292" z3="-2.17534354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62661885" y3="-3.34969419" z3="-1.6361245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36832283" y3="-3.82697275" z3="-0.87896728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.718889" y3="-4.82825774" z3="-1.14500286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3787522" y3="-3.53182794" z3="0.57220834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3898284" y3="-3.0618205" z3="3.33268096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68471218" y3="-4.5665549" z3="1.46493364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09501878" y3="-2.25802036" z3="1.07379756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09844616" y3="-2.02502412" z3="2.44483924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68176468" y3="-4.33383653" z3="2.83916862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88465955" y3="-5.57279735" z3="1.08476473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11337051" y3="-1.4176271" z3="0.41100579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13566223" y3="-1.01947794" z3="2.80450249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88724537" y3="-5.15852034" z3="3.52692977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38194113" y3="-2.88254494" z3="4.41180283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25151189" y3="-1.70971151" z3="-3.94342159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43042786" y3="-1.31548119" z3="-3.04380981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3588929" y3="3.6863134" z3="-1.15376961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15439778" y3="-2.94806609" z3="-1.68989232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92735332" y3="-3.15055627" z3="-0.54098547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10131938" y3="-2.29800302" z3="0.4151508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82612581" y3="-0.74415398" z3="0.727141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.81549516" y3="-0.3149536" z3="-0.79607281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51099438" y3="0.4765803" z3="1.20308233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.93540013" y3="-1.10183104" z3="2.18827151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41126475" y3="-4.36696185" z3="-0.3290051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12378734" y3="-4.63075349" z3="0.86944317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.16896553" y3="-0.09789026" z3="-1.67063357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41076432" y3="0.59302169" z3="-0.6013328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.5129616" y3="-1.1315246" z3="-1.07100438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63192341" y3="0.54297723" z3="0.53806304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13225473" y3="0.24829726" z3="2.21361998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98536253" y3="1.47487789" z3="1.23821596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.38277174" y3="-0.1631008" z3="2.56271795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.75981916" y3="-1.78823997" z3="1.93131952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.35419049" y3="-1.55014168" z3="3.01229594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05812777" y3="-4.04761943" z3="0.90262176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50981785" y3="-4.39740715" z3="1.75177196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35694424" y3="-5.70239121" z3="0.83944864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28893571" y3="-2.19627459" z3="-0.16587913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13331359" y3="-3.27511925" z3="-1.04800212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47564682" y3="-4.43398496" z3="-0.65327023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98312541" y3="-4.51013527" z3="0.6442533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14189766" y3="-3.46937738" z3="1.55451765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78640426" y3="-2.31074954" z3="1.13951713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49117157" y3="-3.18706328" z3="-2.07704859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32207272" y3="-5.25959526" z3="-1.34900487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23990567" y3="-5.70180042" z3="1.05578297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73550537" y3="-3.56586491" z3="2.56238517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88679452" y3="-1.47417897" z3="1.83290452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50009032" y3="4.02822482" z3="-0.1003922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8655979" y3="3.79115617" z3="-0.18376825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36930978" y3="3.20545018" z3="-1.34013084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55041819" y3="2.88886591" z3="-2.4212215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18662944" y3="3.13134702" z3="-2.32097612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08160105" y3="4.43827976" z3="0.82212638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53574175" y3="4.02814878" z3="0.64314766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79635547" y3="2.88095393" z3="-1.40831471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.98281583" y3="2.44230533" z3="-3.31727202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46828101" y3="2.86032554" z3="-3.15039046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14673824" y3="-5.93286881" z3="2.24030993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74181706" y3="-6.3874741" z3="0.18172606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24192389" y3="2.49081815" z3="-2.46684164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45530825" y3="3.00457557" z3="-0.39331541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68678669" y3="0.17207294" z3="-1.9361274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00468267" y3="1.41757234" z3="-1.81434688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.89170788" y3="0.10516084" z3="-2.68884747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.3882652" y3="1.21545451" z3="-3.32537204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.41130633" y3="-0.8552299" z3="-2.76159292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.31321336" y3="1.15196296" z3="-3.905252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.5275995" y3="2.54069938" z3="-2.51494529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.68682061" y3="2.44252836" z3="-3.24651181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99290623" y3="3.49171267" z3="-2.47444528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.06718155" y3="3.31949024" z3="-3.77790822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57295157" y3="3.91448463" z3="-0.23824104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.744144" y3="5.06466701" z3="-0.08655272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90633932" y3="3.9786549" z3="0.25570607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4006255" y3="5.1327808" z3="0.81450745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54155956" y3="3.09294251" z3="0.19307744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4282352" y3="5.15604083" z3="1.18816273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28889993" y3="6.24914901" z3="0.48219064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59017172" y3="6.2889264" z3="0.91754231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64435809" y3="7.12838842" z3="0.57827737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.99748931" y3="7.20357015" z3="1.3573034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39235047" y3="-3.86689513" z3="-2.87187654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55950738" y3="-4.91216142" z3="-2.57001779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28002214" y3="-3.53392515" z3="-3.44218294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53192636" y3="-3.83673739" z3="-3.55889685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72493088" y3="-1.55029871" z3="-2.04943713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46938596" y3="-1.06098123" z3="-2.69585734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54770748" y3="-0.91031453" z3="-1.17534949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78406755" y3="-1.58064649" z3="-2.62081051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9432,-.9528,-.6506;6.6489,-1.9461,-1.4744;6.1288,-.9917,-1.3464;4.8062,1.4799,-1.0301;4.3064,.3114,-.4809;2.6841,2.7284,-1.1883;4.0237,2.7351,-.8413;2.3741,4.993,-.4495;1.8236,3.8419,-.962;1.7395,5.8691,-.2836;2.1406,1.5952,-1.7193;3.1285,.3526,.2082;1.7358,.3747,-.6828;.6099,.7314,.2166;1.7052,-.8694,-1.5425;1.0847,-2.4646,-1.3543;1.8705,-5.4516,-6.3493;1.6322,-5.0215,-5.3723;1.0023,-3.8926,-2.8915;1.6041,-3.6414,-5.2178;1.3761,-5.8531,-4.2795;1.0752,-5.2826,-3.0488;1.2987,-3.0458,-3.984;1.812,-2.9704,-6.0549;1.4237,-6.9404,-4.38;.9108,-5.9194,-2.1753;.6266,-3.3497,-1.6361;-.3683,-3.827,-.879;-.7189,-4.8283,-1.145;-.3788,-3.5318,.5722;-.3898,-3.0618,3.3327;-.6847,-4.5666,1.4649;-.095,-2.258,1.0738;-.0984,-2.025,2.4448;-.6818,-4.3338,2.8392;-.8847,-5.5728,1.0848;.1134,-1.4176,.411;.1357,-1.0195,2.8045;-.8872,-5.1585,3.5269;-.3819,-2.8825,4.4118;1.2515,-1.7097,-3.9434;1.4304,-1.3155,-3.0438;.3589,3.6863,-1.1538;-2.1544,-2.9481,-1.6899;-2.9274,-3.1506,-.541;-3.1013,-2.298,.4152;-3.8261,-.7442,.7271;-4.8155,-.315,-.7961;-2.511,.4766,1.2031;-4.9354,-1.1018,2.1883;-3.4113,-4.367,-.329;-4.1238,-4.6308,.8694;-4.169,-.0979,-1.6706;-5.4108,.593,-.6013;-5.513,-1.1315,-1.071;-1.6319,.543,.5381;-2.1323,.2483,2.2136;-2.9854,1.4749,1.2382;-5.3828,-.1631,2.5627;-5.7598,-1.7882,1.9313;-4.3542,-1.5501,3.0123;-5.0581,-4.0476,.9026;-3.5098,-4.3974,1.7518;-4.3569,-5.7024,.8394;4.2889,-2.1963,-.1659;4.1333,-3.2751,-1.048;3.4756,-4.434,-.6533;2.9831,-4.5101,.6443;3.1419,-3.4694,1.5545;3.7864,-2.3107,1.1395;4.4912,-3.1871,-2.077;3.3221,-5.2596,-1.349;2.2399,-5.7018,1.0558;2.7355,-3.5659,2.5624;3.8868,-1.4742,1.8329;-.5001,4.0282,-.1004;-1.8656,3.7912,-.1838;-2.3693,3.2055,-1.3401;-1.5504,2.8889,-2.4212;-.1866,3.1313,-2.321;-.0816,4.4383,.8221;-2.5357,4.0281,.6431;-3.7964,2.881,-1.4083;-1.9828,2.4423,-3.3173;.4683,2.8603,-3.1504;2.1467,-5.9329,2.2403;1.7418,-6.3875,.1817;-4.2419,2.4908,-2.4668;-4.4553,3.0046,-.3933;6.6868,.1721,-1.9361;6.0047,1.4176,-1.8143;7.8917,.1052,-2.6888;8.3883,1.2155,-3.3254;8.4113,-.8552,-2.7616;9.3132,1.152,-3.9053;6.5276,2.5407,-2.5149;7.6868,2.4425,-3.2465;5.9929,3.4917,-2.4744;8.0672,3.3195,-3.7779;4.573,3.9145,-.2382;3.7441,5.0647,-.0866;5.9063,3.9787,.2557;6.4006,5.1328,.8145;6.5416,3.0929,.1931;7.4282,5.156,1.1882;4.2889,6.2491,.4822;5.5902,6.2889,.9175;3.6444,7.1284,.5783;5.9975,7.2036,1.3573;-2.3924,-3.8669,-2.8719;-2.5595,-4.9122,-2.57;-3.28,-3.5339,-3.4422;-1.5319,-3.8367,-3.5589;-1.7249,-1.5503,-2.0494;-2.4694,-1.061,-2.6959;-1.5477,-.9103,-1.1753;-.7841,-1.5806,-2.6208;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662708433265</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009348860500 0.000959009011 0.030825066769 0.005337892229</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043527103 -0.005029872 0.000125009 0.000194696 0.000258959 0.000298021 0.000330635 0.000397860 0.000430569 0.000529878 0.000644744 0.000770487 0.000795180 0.000859286 0.000938917 0.001051041 0.001168678 0.001202254 0.001254602 0.001296955 0.001427525 0.001459925 0.001515544 0.001638988 0.001760492 0.001995753 0.002160421 0.002404730 0.003040879 0.003187905 0.003528201 0.003954274 0.004261107 0.004345482 0.004710781 0.005036515 0.005369712 0.005590226 0.006146484 0.006730077 0.006908793 0.007419462 0.007832849 0.008172088 0.008659653 0.008933010 0.009292661 0.009803591 0.010194399 0.010656427 0.012526547 0.012780579 0.013352115 0.014294326 0.014455051 0.014841683 0.015103820 0.015400136 0.016023896 0.016310966 0.016395916 0.017709692 0.018292490 0.018866717 0.019647655 0.020364238 0.021182435 0.022207977 0.023028983 0.023354887 0.024539947 0.025041221 0.025952207 0.026023701 0.026602203 0.026835334 0.027765832 0.029787079 0.030423837 0.031487901 0.032159642 0.032727383 0.033775798 0.036190236 0.038252405 0.039330833 0.039812538 0.040344577 0.040863917 0.041463384 0.044246809 0.045275286 0.046150355 0.047177429 0.049669300 0.050669464 0.051375788 0.051573883 0.051804501 0.052281771 0.052388345 0.052558007 0.053836053 0.054739803 0.056491871 0.056842751 0.056954842 0.057103768 0.057346473 0.057791546 0.058541513 0.059220627 0.059774061 0.060448117 0.060627618 0.061456297 0.061632475 0.062474998 0.064557760 0.064754399 0.065673080 0.067785774 0.068325354 0.069719821 0.071837298 0.072663744 0.076462815 0.078164944 0.080447093 0.081519907 0.082261615 0.087206690 0.089480432 0.090818470 0.092838552 0.093314421 0.094204885 0.095260133 0.095381002 0.096426217 0.096520124 0.097279216 0.098535035 0.099444041 0.100869808 0.101229062 0.102417501 0.102651835 0.103704418 0.103829000 0.104610657 0.106859821 0.108197289 0.108313363 0.109926600 0.110320070 0.112558496 0.113568140 0.115986223 0.116486620 0.117309029 0.120439445 0.122944239 0.126132136 0.127516567 0.128525875 0.130119357 0.132339168 0.133267133 0.135282251 0.136687906 0.142104670 0.143914734 0.144620242 0.145730889 0.146696591 0.152522819 0.156075326 0.157289260 0.161835789 0.170418959 0.173957917 0.175921713 0.176219257 0.180478478 0.183233816 0.185591435 0.188021058 0.188480821 0.196030192 0.201786590 0.204951998 0.205199541 0.206782375 0.207151271 0.209059573 0.210656951 0.212681195 0.214813495 0.215559044 0.219828137 0.224808960 0.231510663 0.232677018 0.233590523 0.235078214 0.244466503 0.248685767 0.254504954 0.255252192 0.256706359 0.258805106 0.271368675 0.277432047 0.290035127 0.296168288 0.297495393 0.299347939 0.304116133 0.306157177 0.307531993 0.314416603 0.320563371 0.322773584 0.325990401 0.328805572 0.345586744 0.350101393 0.350706703 0.354693989 0.359103929 0.363801528 0.374089310 0.380575368 0.390139007 0.399511014 0.406183439 0.428239113 0.430118249 0.444798037 0.463724861 0.463854409 0.477810816 0.477895848 0.482329199 0.485526463 0.498023110 0.509478470 0.542149084 0.564444499 0.566754411 0.577427208 0.583289194 0.604282475 0.631881227 0.643381292 0.646343594 0.665322062 0.671376942 0.681326147 0.681699743 0.691613401 0.697131331 0.704240579 0.705267519 0.714018314 0.719485476 0.737197317 0.750679835 0.771573647 0.775836716 0.800655223 0.815473171 0.817256409 0.819951951 0.820536212 0.824391535 0.830928211 0.834573486 0.840473894 0.842605816 0.844998229 0.848862008 0.857120682 0.858189987 0.862626898 0.867340434 0.872041362 0.875866052 0.887102444 0.888955465 0.893663917 0.915194085 0.919062105 0.923915454 0.931178863 0.934206616 0.957794666 0.958430941 0.969334760 0.975847763 0.989192766 0.999616187 1.012976140 1.034024996 1.042609772 1.049211256 1.055232379 1.073419486 1.084187956 1.088649667 1.109990547 1.110585300 1.116128533 1.122411848 1.123318582 1.134065391 1.142446640 1.161171108 1.168739886 1.172598156 1.173230883 1.200402763 1.204202585 1.215345128 1.247262330 1.291428968 1.295642413 1.302718135 1.314437088 1.326276721 1.326813522 1.330137079 1.334428058 1.340925918 1.345775186 1.362018042 1.365342127 1.378772430 1.380883403 1.381286449 1.384877524 1.557441369 1.671842916 1.785986596</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">52</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93982323" y3="-0.95315559" z3="-0.65429711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.64416509" y3="-1.94649224" z3="-1.48095058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12442568" y3="-0.99209485" z3="-1.35203406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80315993" y3="1.47977342" z3="-1.03274244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30362687" y3="0.31122153" z3="-0.48343612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68177794" y3="2.73000836" z3="-1.18593287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02195175" y3="2.73530617" z3="-0.84130928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37463769" y3="4.9935674" z3="-0.44260339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82248833" y3="3.84380212" z3="-0.95637584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74083864" y3="5.86977244" z3="-0.27400968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13646167" y3="1.59783636" z3="-1.71748825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12676366" y3="0.35268685" z3="0.20726617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73280003" y3="0.37640335" z3="-0.6817568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6083444" y3="0.73250476" z3="0.21965316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70036392" y3="-0.86703886" z3="-1.54249691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08515301" y3="-2.46418302" z3="-1.35341246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87729553" y3="-5.45597786" z3="-6.34469603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63793466" y3="-5.02510112" z3="-5.36830212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00522762" y3="-3.89422701" z3="-2.88929954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60919037" y3="-3.64495952" z3="-5.21508159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38104775" y3="-5.8558882" z3="-4.27499916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07875943" y3="-5.28440455" z3="-3.04513008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30237583" y3="-3.04825007" z3="-3.98212846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81769748" y3="-2.9745762" z3="-6.05249967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.42897177" y3="-6.94320387" z3="-4.37447571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91385081" y3="-5.92048639" z3="-2.17128219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62841684" y3="-3.35020644" z3="-1.63467686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36373918" y3="-3.83016892" z3="-0.87555722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71521408" y3="-4.83024744" z3="-1.14246116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37601651" y3="-3.53264203" z3="0.57450325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38837204" y3="-3.05942715" z3="3.3337087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68099226" y3="-4.56655136" z3="1.46756877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09478009" y3="-2.25749587" z3="1.07450002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09885138" y3="-2.0229447" z3="2.44512643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67822038" y3="-4.33241005" z3="2.84149351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87962373" y3="-5.57311856" z3="1.08811719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11158239" y3="-1.41726717" z3="0.41017126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13321297" y3="-1.01635546" z3="2.80358142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88213758" y3="-5.1566655" z3="3.53001724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38065696" y3="-2.87915168" z3="4.41263823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25484871" y3="-1.71223263" z3="-3.94300934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43091672" y3="-1.3164159" z3="-3.04348277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35744589" y3="3.68994313" z3="-1.1465235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15424422" y3="-2.95165606" z3="-1.68917099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92576056" y3="-3.15223816" z3="-0.54023922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09708836" y3="-2.30334345" z3="0.41892862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82203208" y3="-0.74177454" z3="0.71571719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.80224851" y3="-0.31212572" z3="-0.81018545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51072425" y3="0.47855714" z3="1.20046686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.94601896" y3="-1.0966293" z3="2.17153215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41335105" y3="-4.36442473" z3="-0.32971236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12047957" y3="-4.62954937" z3="0.87309879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.17303815" y3="-0.09354451" z3="-1.68051387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40587887" y3="0.59546262" z3="-0.61905168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.49357281" y3="-1.127945" z3="-1.08151229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62532661" y3="0.54259429" z3="0.54050593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13850811" y3="0.25102122" z3="2.21415407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98656166" y3="1.47686608" z3="1.23153593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.39373735" y3="-0.16058116" z3="2.54656729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.77439837" y3="-1.77957631" z3="1.90049445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.3761566" y3="-1.55222896" z3="3.00657618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05676802" y3="-4.04824873" z3="0.90755234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50246882" y3="-4.39184597" z3="1.75348932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35150238" y3="-5.70346059" z3="0.8481408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28673898" y3="-2.1967024" z3="-0.16829263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13300548" y3="-3.27705766" z3="-1.04890441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47722197" y3="-4.43647098" z3="-0.652662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98432149" y3="-4.51155735" z3="0.6447747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14121826" y3="-3.46928777" z3="1.55359041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78410901" y3="-2.31029119" z3="1.13718903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49101258" y3="-3.19000538" z3="-2.07798476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32537232" y3="-5.26335719" z3="-1.34723317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2426494" y3="-5.70368024" z3="1.05771645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73466691" y3="-3.56494731" z3="2.56147571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88321934" y3="-1.4728527" z3="1.82964854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49997554" y3="4.02960871" z3="-0.09122099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86585696" y3="3.79429374" z3="-0.17389039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37139845" y3="3.21272517" z3="-1.33138562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55406516" y3="2.89863951" z3="-2.41433644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18987009" y3="3.13903859" z3="-2.31475186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08013707" y3="4.43659737" z3="0.83186313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53500797" y3="4.02969452" z3="0.65406062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79917075" y3="2.89017205" z3="-1.39978881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.988222" y3="2.45606643" z3="-3.31176941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46389029" y3="2.86985609" z3="-3.14580097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14989187" y3="-5.93355568" z3="2.24246757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74516533" y3="-6.39082018" z3="0.18442146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24558881" y3="2.50476765" z3="-2.45710856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4564764" y3="3.00843848" z3="-0.38311826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68172161" y3="0.17163306" z3="-1.9424096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00032503" y3="1.4173405" z3="-1.81897114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.88538766" y3="0.10459098" z3="-2.69712756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.38135493" y3="1.21500753" z3="-3.33388685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.40448608" y3="-0.85597025" z3="-2.77118647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.3053438" y3="1.15142925" z3="-3.9152847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52256843" y3="2.54064706" z3="-2.51976764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.68057239" y3="2.44235813" z3="-3.25324308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98831065" y3="3.49185544" z3="-2.47785061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.06048642" y3="3.31943071" z3="-3.78477049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57314209" y3="3.91329722" z3="-0.23732189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74535027" y3="5.06370462" z3="-0.08191822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90752991" y3="3.97572199" z3="0.25412818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40357759" y3="5.12845865" z3="0.81421853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.542114" y3="3.08977263" z3="0.1885389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43192217" y3="5.15037645" z3="1.18592163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29188383" y3="6.24673147" z3="0.48811908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59399762" y3="6.28485968" z3="0.92110502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.648057" y3="7.1261618" z3="0.58715329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.00268166" y3="7.19837133" z3="1.3619339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39014593" y3="-3.87403531" z3="-2.86906067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55722291" y3="-4.91852" z3="-2.56523777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27768143" y3="-3.54318542" z3="-3.44081495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52960112" y3="-3.84542793" z3="-3.55609703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72294507" y3="-1.55608579" z3="-2.05152829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46850886" y3="-1.07174714" z3="-2.71300599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5531769" y3="-0.90692465" z3="-1.1770045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77866877" y3="-1.58931223" z3="-2.61989792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9398,-.9532,-.6543;6.6442,-1.9465,-1.481;6.1244,-.9921,-1.352;4.8032,1.4798,-1.0327;4.3036,.3112,-.4834;2.6818,2.73,-1.1859;4.022,2.7353,-.8413;2.3746,4.9936,-.4426;1.8225,3.8438,-.9564;1.7408,5.8698,-.274;2.1365,1.5978,-1.7175;3.1268,.3527,.2073;1.7328,.3764,-.6818;.6083,.7325,.2197;1.7004,-.867,-1.5425;1.0852,-2.4642,-1.3534;1.8773,-5.456,-6.3447;1.6379,-5.0251,-5.3683;1.0052,-3.8942,-2.8893;1.6092,-3.645,-5.2151;1.381,-5.8559,-4.275;1.0788,-5.2844,-3.0451;1.3024,-3.0483,-3.9821;1.8177,-2.9746,-6.0525;1.429,-6.9432,-4.3745;.9139,-5.9205,-2.1713;.6284,-3.3502,-1.6347;-.3637,-3.8302,-.8756;-.7152,-4.8302,-1.1425;-.376,-3.5326,.5745;-.3884,-3.0594,3.3337;-.681,-4.5666,1.4676;-.0948,-2.2575,1.0745;-.0989,-2.0229,2.4451;-.6782,-4.3324,2.8415;-.8796,-5.5731,1.0881;.1116,-1.4173,.4102;.1332,-1.0164,2.8036;-.8821,-5.1567,3.53;-.3807,-2.8792,4.4126;1.2548,-1.7122,-3.943;1.4309,-1.3164,-3.0435;.3574,3.6899,-1.1465;-2.1542,-2.9517,-1.6892;-2.9258,-3.1522,-.5402;-3.0971,-2.3033,.4189;-3.822,-.7418,.7157;-4.8022,-.3121,-.8102;-2.5107,.4786,1.2005;-4.946,-1.0966,2.1715;-3.4134,-4.3644,-.3297;-4.1205,-4.6295,.8731;-4.173,-.0935,-1.6805;-5.4059,.5955,-.6191;-5.4936,-1.1279,-1.0815;-1.6253,.5426,.5405;-2.1385,.251,2.2142;-2.9866,1.4769,1.2315;-5.3937,-.1606,2.5466;-5.7744,-1.7796,1.9005;-4.3762,-1.5522,3.0066;-5.0568,-4.0482,.9076;-3.5025,-4.3918,1.7535;-4.3515,-5.7035,.8481;4.2867,-2.1967,-.1683;4.133,-3.2771,-1.0489;3.4772,-4.4365,-.6527;2.9843,-4.5116,.6448;3.1412,-3.4693,1.5536;3.7841,-2.3103,1.1372;4.491,-3.19,-2.078;3.3254,-5.2634,-1.3472;2.2426,-5.7037,1.0577;2.7347,-3.5649,2.5615;3.8832,-1.4729,1.8296;-.5,4.0296,-.0912;-1.8659,3.7943,-.1739;-2.3714,3.2127,-1.3314;-1.5541,2.8986,-2.4143;-.1899,3.139,-2.3148;-.0801,4.4366,.8319;-2.535,4.0297,.6541;-3.7992,2.8902,-1.3998;-1.9882,2.4561,-3.3118;.4639,2.8699,-3.1458;2.1499,-5.9336,2.2425;1.7452,-6.3908,.1844;-4.2456,2.5048,-2.4571;-4.4565,3.0084,-.3831;6.6817,.1716,-1.9424;6.0003,1.4173,-1.819;7.8854,.1046,-2.6971;8.3814,1.215,-3.3339;8.4045,-.856,-2.7712;9.3053,1.1514,-3.9153;6.5226,2.5406,-2.5198;7.6806,2.4424,-3.2532;5.9883,3.4919,-2.4779;8.0605,3.3194,-3.7848;4.5731,3.9133,-.2373;3.7454,5.0637,-.0819;5.9075,3.9757,.2541;6.4036,5.1285,.8142;6.5421,3.0898,.1885;7.4319,5.1504,1.1859;4.2919,6.2467,.4881;5.594,6.2849,.9211;3.6481,7.1262,.5872;6.0027,7.1984,1.3619;-2.3901,-3.874,-2.8691;-2.5572,-4.9185,-2.5652;-3.2777,-3.5432,-3.4408;-1.5296,-3.8454,-3.5561;-1.7229,-1.5561,-2.0515;-2.4685,-1.0717,-2.713;-1.5532,-.9069,-1.177;-.7787,-1.5893,-2.6199;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662739241818</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009289931076 0.000905095770 0.025373104733 0.005336968799</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043574264 -0.004773102 0.000125401 0.000196643 0.000259393 0.000307907 0.000330857 0.000401771 0.000431375 0.000531283 0.000644761 0.000770516 0.000797914 0.000879263 0.000938941 0.001056768 0.001170439 0.001209787 0.001255712 0.001298698 0.001428923 0.001462135 0.001518768 0.001699124 0.001766649 0.002052335 0.002168037 0.002403215 0.003043556 0.003189163 0.003539689 0.003954370 0.004288654 0.004375497 0.004719352 0.005039993 0.005418532 0.005590207 0.006157998 0.006747177 0.006942512 0.007426369 0.007903871 0.008253688 0.008660224 0.009091031 0.009313436 0.009862284 0.010196325 0.010873415 0.012528775 0.012781559 0.013352801 0.014298290 0.014474883 0.014841948 0.015134186 0.015407932 0.016024536 0.016328195 0.016397239 0.017719213 0.018347432 0.018870556 0.020026447 0.020372831 0.021235416 0.022208099 0.023029134 0.023358613 0.024544468 0.025050540 0.025959560 0.026083040 0.026631183 0.026918126 0.027767515 0.029789649 0.030424039 0.031510998 0.032266690 0.032727321 0.034050302 0.036270793 0.038253100 0.039331476 0.039980882 0.040348849 0.040939748 0.041664761 0.044258977 0.045275709 0.046150279 0.047174843 0.049669345 0.050671704 0.051377133 0.051574022 0.051804536 0.052281779 0.052388347 0.052557774 0.053836797 0.054739980 0.056493348 0.056842784 0.056989630 0.057281926 0.057707582 0.058528939 0.059076228 0.059220934 0.060377336 0.060558408 0.060635057 0.061481318 0.061898334 0.062631834 0.064557730 0.064768124 0.065684987 0.067787601 0.068344751 0.069767501 0.071837653 0.072663704 0.076462824 0.078165131 0.080474593 0.081649457 0.082263806 0.087207087 0.089480450 0.090818313 0.092838572 0.093314354 0.094205336 0.095260126 0.095389901 0.096428515 0.096542857 0.097285903 0.098588442 0.099443805 0.100953334 0.101229239 0.102417544 0.102685564 0.103755883 0.103839499 0.105134704 0.106859807 0.108202060 0.108322801 0.109975689 0.110328962 0.112561548 0.113624258 0.115993243 0.116486613 0.117310295 0.120448560 0.122948203 0.126144233 0.127520273 0.128532484 0.130124270 0.132365256 0.133322841 0.135383287 0.136688795 0.142104680 0.144048061 0.144642838 0.145732524 0.146695789 0.152522213 0.156161697 0.157289671 0.162330916 0.170419567 0.173981731 0.175963733 0.176583418 0.180479345 0.183233926 0.185592408 0.188021095 0.188480607 0.196170556 0.201789598 0.204954058 0.205225889 0.206782415 0.207151997 0.209061525 0.210665741 0.212690930 0.215239308 0.215568095 0.220036756 0.224809879 0.231512950 0.232679545 0.233590910 0.235078778 0.244466707 0.248820221 0.254505084 0.255280494 0.256706603 0.258805318 0.271368888 0.277435008 0.290035304 0.296168325 0.297502827 0.299349110 0.304118619 0.306157776 0.307533082 0.314416441 0.320563820 0.322774198 0.325997769 0.328807287 0.345598943 0.350100227 0.350712666 0.354696149 0.359106992 0.363804063 0.377637565 0.380575998 0.390161975 0.399790990 0.406218517 0.428354392 0.430119784 0.444847624 0.463741653 0.463863809 0.477810372 0.477896073 0.482351687 0.486297884 0.498023102 0.509486828 0.542150679 0.564450675 0.566754444 0.577470761 0.583289248 0.604282530 0.632241322 0.643424125 0.647279192 0.665323543 0.671379474 0.681334374 0.681787005 0.691620801 0.697278708 0.704240582 0.705268886 0.714023529 0.719506409 0.737198100 0.750679841 0.771573647 0.775836774 0.800916487 0.816339664 0.818666134 0.820218535 0.821059758 0.824967415 0.830936946 0.835082643 0.840478154 0.842632784 0.844993024 0.848866894 0.857506405 0.858513319 0.867339466 0.868496845 0.872043326 0.875870668 0.887130571 0.888955829 0.893664876 0.915426427 0.919107079 0.923915524 0.931198255 0.934498801 0.957828517 0.958432803 0.969337209 0.975847965 0.989193172 0.999616282 1.012991178 1.034025746 1.042609767 1.049220803 1.055235562 1.073641328 1.084188457 1.088652772 1.109990550 1.110585314 1.116141571 1.122411857 1.123318571 1.134067459 1.142458120 1.161171655 1.168740380 1.172600669 1.173231220 1.200402965 1.204205145 1.215377761 1.247262449 1.291434443 1.295647904 1.303041746 1.314445693 1.326276725 1.326815978 1.330137039 1.334431716 1.340925948 1.345781489 1.362017948 1.365989959 1.378773260 1.380884581 1.381288555 1.384960046 1.557444301 1.671844035 1.786499566</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">53</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93665283" y3="-0.95349104" z3="-0.65770783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63960415" y3="-1.94691238" z3="-1.48719675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12013369" y3="-0.99249215" z3="-1.35740217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80027556" y3="1.47961502" z3="-1.03518933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30103507" y3="0.31103676" z3="-0.48569005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67952837" y3="2.73155506" z3="-1.18354029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02027788" y3="2.73548464" z3="-0.84117396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37515539" y3="4.994086" z3="-0.43574356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82144415" y3="3.84560906" z3="-0.95076277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74217268" y3="5.87037341" z3="-0.26446468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13253109" y3="1.60044907" z3="-1.7157045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12512854" y3="0.35288363" z3="0.20656338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73003986" y3="0.37789665" z3="-0.68074132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60691703" y3="0.7335267" z3="0.22252114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6961615" y3="-0.86481729" z3="-1.54232471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08534824" y3="-2.46441742" z3="-1.35232881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.88507624" y3="-5.46071896" z3="-6.33981385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.64441535" y3="-5.02906139" z3="-5.36408986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00834372" y3="-3.89610829" z3="-2.88678973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.61498531" y3="-3.64880705" z3="-5.21211196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38647985" y3="-5.85894296" z3="-4.2703509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.08255713" y3="-5.2864072" z3="-3.04139446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30646233" y3="-3.05104104" z3="-3.98007785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82420585" y3="-2.97908357" z3="-6.04988494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.43489381" y3="-6.94634102" z3="-4.36873372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91695808" y3="-5.92181078" z3="-2.16719309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63014328" y3="-3.35133944" z3="-1.63293883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36271393" y3="-3.83103718" z3="-0.87453436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71195912" y3="-4.83260887" z3="-1.13986566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37534442" y3="-3.53250791" z3="0.57562034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38693388" y3="-3.05698296" z3="3.33485063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67777796" y3="-4.56646771" z3="1.47018006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09580911" y3="-2.25649576" z3="1.07443581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.099698" y3="-2.02065416" z3="2.44493543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67472273" y3="-4.33104511" z3="2.84397176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87488261" y3="-5.57390925" z3="1.09187972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10975076" y3="-1.41679439" z3="0.40946724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13082444" y3="-1.0132445" z3="2.80221463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87704031" y3="-5.15503817" z3="3.53335401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3792671" y3="-2.87562774" z3="4.41362156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25854915" y3="-1.71498984" z3="-3.94252008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43161356" y3="-1.31775966" z3="-3.04308949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35600229" y3="3.69340962" z3="-1.13933096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15243259" y3="-2.95623022" z3="-1.69076535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9256244" y3="-3.15366632" z3="-0.54196162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10058519" y3="-2.29776121" z3="0.41107588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82787364" y3="-0.74116776" z3="0.70870756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.79964342" y3="-0.30944988" z3="-0.82365935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51345365" y3="0.47612219" z3="1.1988538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.95710881" y3="-1.09362852" z3="2.15775121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4099813" y3="-4.36832876" z3="-0.32520224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11665815" y3="-4.62895932" z3="0.87801711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.15174115" y3="-0.08694166" z3="-1.69040552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40318009" y3="0.59647076" z3="-0.63458913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.48668225" y3="-1.12754858" z3="-1.10239217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62650353" y3="0.54116722" z3="0.54349141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14721288" y3="0.24701603" z3="2.21594544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98573727" y3="1.47489306" z3="1.22905561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.40717146" y3="-0.14832642" z3="2.52164667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.77659457" y3="-1.7782975" z3="1.89734809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.38329259" y3="-1.53736884" z3="2.98120308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.054801" y3="-4.04995891" z3="0.91048547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49846441" y3="-4.38615892" z3="1.75681032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34473897" y3="-5.70361611" z3="0.85679511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2846822" y3="-2.19709971" z3="-0.17038824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13267667" y3="-3.27890608" z3="-1.04955168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4787029" y3="-4.43883592" z3="-0.65182664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98552027" y3="-4.51288114" z3="0.64554495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14067493" y3="-3.46913722" z3="1.55297542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78203547" y3="-2.30979369" z3="1.13520807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49070856" y3="-3.19280684" z3="-2.07870519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32843648" y3="-5.26693705" z3="-1.3452831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24531509" y3="-5.70541925" z3="1.05987557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73404002" y3="-3.56398507" z3="2.56090933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87999726" y3="-1.47151378" z3="1.82678941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49974921" y3="4.03069242" z3="-0.08184644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86593974" y3="3.79693065" z3="-0.16353239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37376009" y3="3.22000429" z3="-1.32274274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55806492" y3="2.9086205" z3="-2.40769404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19336754" y3="3.14677729" z3="-2.30867723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07832823" y3="4.43459156" z3="0.84193014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53375558" y3="4.03055099" z3="0.66617437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80195159" y3="2.89956585" z3="-1.39011199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.99352501" y3="2.46929167" z3="-3.30579657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45923551" y3="2.87931088" z3="-3.14117748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15320648" y3="-5.93431438" z3="2.24493587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74825976" y3="-6.39387472" z3="0.18736968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.25401236" y3="2.52869424" z3="-2.45443571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45540543" y3="3.0070017" z3="-0.36812702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.67672178" y3="0.17117041" z3="-1.94854544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99605356" y3="1.41709361" z3="-1.82344125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.87900227" y3="0.10394427" z3="-2.70545175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.37426765" y3="1.21443104" z3="-3.34263649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.39756619" y3="-0.85680185" z3="-2.78085369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.29716691" y3="1.15070464" z3="-3.92574717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51754637" y3="2.54054101" z3="-2.52455856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.67419048" y3="2.44207265" z3="-3.26015521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98375652" y3="3.49195995" z3="-2.48117834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.0535649" y3="3.31921414" z3="-3.79195498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57334165" y3="3.91214418" z3="-0.23629328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74652485" y3="5.06275142" z3="-0.07726348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90870434" y3="3.97290974" z3="0.25273399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40644387" y3="5.12430155" z3="0.8140919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5426856" y3="3.08674829" z3="0.18427573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4355039" y3="5.14493781" z3="1.18389027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29476886" y3="6.24437437" z3="0.49407243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59769728" y3="6.2809325" z3="0.92475094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65162706" y3="7.12397955" z3="0.59600376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0077034" y3="7.19335083" z3="1.36662533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38772108" y3="-3.88176086" z3="-2.86811601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55458933" y3="-4.92558545" z3="-2.56098113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27501616" y3="-3.55245528" z3="-3.44103705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.5266462" y3="-3.85482086" z3="-3.55436991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72228164" y3="-1.56089559" z3="-2.05611448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4664176" y3="-1.07707875" z3="-2.71093439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54914487" y3="-0.91377509" z3="-1.18454926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78002584" y3="-1.5934797" z3="-2.62525473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9367,-.9535,-.6577;6.6396,-1.9469,-1.4872;6.1201,-.9925,-1.3574;4.8003,1.4796,-1.0352;4.301,.311,-.4857;2.6795,2.7316,-1.1835;4.0203,2.7355,-.8412;2.3752,4.9941,-.4357;1.8214,3.8456,-.9508;1.7422,5.8704,-.2645;2.1325,1.6004,-1.7157;3.1251,.3529,.2066;1.73,.3779,-.6807;.6069,.7335,.2225;1.6962,-.8648,-1.5423;1.0853,-2.4644,-1.3523;1.8851,-5.4607,-6.3398;1.6444,-5.0291,-5.3641;1.0083,-3.8961,-2.8868;1.615,-3.6488,-5.2121;1.3865,-5.8589,-4.2704;1.0826,-5.2864,-3.0414;1.3065,-3.051,-3.9801;1.8242,-2.9791,-6.0499;1.4349,-6.9463,-4.3687;.917,-5.9218,-2.1672;.6301,-3.3513,-1.6329;-.3627,-3.831,-.8745;-.712,-4.8326,-1.1399;-.3753,-3.5325,.5756;-.3869,-3.057,3.3349;-.6778,-4.5665,1.4702;-.0958,-2.2565,1.0744;-.0997,-2.0207,2.4449;-.6747,-4.331,2.844;-.8749,-5.5739,1.0919;.1098,-1.4168,.4095;.1308,-1.0132,2.8022;-.877,-5.155,3.5334;-.3793,-2.8756,4.4136;1.2585,-1.715,-3.9425;1.4316,-1.3178,-3.0431;.356,3.6934,-1.1393;-2.1524,-2.9562,-1.6908;-2.9256,-3.1537,-.542;-3.1006,-2.2978,.4111;-3.8279,-.7412,.7087;-4.7996,-.3094,-.8237;-2.5135,.4761,1.1989;-4.9571,-1.0936,2.1578;-3.41,-4.3683,-.3252;-4.1167,-4.629,.878;-4.1517,-.0869,-1.6904;-5.4032,.5965,-.6346;-5.4867,-1.1275,-1.1024;-1.6265,.5412,.5435;-2.1472,.247,2.2159;-2.9857,1.4749,1.2291;-5.4072,-.1483,2.5216;-5.7766,-1.7783,1.8973;-4.3833,-1.5374,2.9812;-5.0548,-4.05,.9105;-3.4985,-4.3862,1.7568;-4.3447,-5.7036,.8568;4.2847,-2.1971,-.1704;4.1327,-3.2789,-1.0496;3.4787,-4.4388,-.6518;2.9855,-4.5129,.6455;3.1407,-3.4691,1.553;3.782,-2.3098,1.1352;4.4907,-3.1928,-2.0787;3.3284,-5.2669,-1.3453;2.2453,-5.7054,1.0599;2.734,-3.564,2.5609;3.88,-1.4715,1.8268;-.4997,4.0307,-.0818;-1.8659,3.7969,-.1635;-2.3738,3.22,-1.3227;-1.5581,2.9086,-2.4077;-.1934,3.1468,-2.3087;-.0783,4.4346,.8419;-2.5338,4.0306,.6662;-3.802,2.8996,-1.3901;-1.9935,2.4693,-3.3058;.4592,2.8793,-3.1412;2.1532,-5.9343,2.2449;1.7483,-6.3939,.1874;-4.254,2.5287,-2.4544;-4.4554,3.007,-.3681;6.6767,.1712,-1.9485;5.9961,1.4171,-1.8234;7.879,.1039,-2.7055;8.3743,1.2144,-3.3426;8.3976,-.8568,-2.7809;9.2972,1.1507,-3.9257;6.5175,2.5405,-2.5246;7.6742,2.4421,-3.2602;5.9838,3.492,-2.4812;8.0536,3.3192,-3.792;4.5733,3.9121,-.2363;3.7465,5.0628,-.0773;5.9087,3.9729,.2527;6.4064,5.1243,.8141;6.5427,3.0867,.1843;7.4355,5.1449,1.1839;4.2948,6.2444,.4941;5.5977,6.2809,.9248;3.6516,7.124,.596;6.0077,7.1934,1.3666;-2.3877,-3.8818,-2.8681;-2.5546,-4.9256,-2.561;-3.275,-3.5525,-3.441;-1.5266,-3.8548,-3.5544;-1.7223,-1.5609,-2.0561;-2.4664,-1.0771,-2.7109;-1.5491,-.9138,-1.1845;-.78,-1.5935,-2.6253;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662734595617</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009813997449 0.001080395273 0.032169817607 0.005337239353</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043613517 -0.006178030 0.000129958 0.000195970 0.000259177 0.000316144 0.000331377 0.000405777 0.000433931 0.000532166 0.000646626 0.000770560 0.000799696 0.000903546 0.000942102 0.001062300 0.001170700 0.001217315 0.001258004 0.001301702 0.001435956 0.001466703 0.001519244 0.001734078 0.001794794 0.002132835 0.002249748 0.002442237 0.003047173 0.003199400 0.003571453 0.003956035 0.004321859 0.004435186 0.004724411 0.005102749 0.005530955 0.005590218 0.006170651 0.006755783 0.007031417 0.007431822 0.007923577 0.008338850 0.008689610 0.009119736 0.009380540 0.009951164 0.010209794 0.010868272 0.012529848 0.012786405 0.013356803 0.014305452 0.014508548 0.014841768 0.015199840 0.015424762 0.016027633 0.016379047 0.016421297 0.017728031 0.018364311 0.018873221 0.020312042 0.020450773 0.021343568 0.022208102 0.023029086 0.023358100 0.024545059 0.025170153 0.025964577 0.026078229 0.026629870 0.026911025 0.027767542 0.029798698 0.030424062 0.031573968 0.032277738 0.032730993 0.034607445 0.036329616 0.038256179 0.039332039 0.040023932 0.040353494 0.040972087 0.041856228 0.044544619 0.045284093 0.046151658 0.047956122 0.049669426 0.050676592 0.051378375 0.051574245 0.051804560 0.052281784 0.052388340 0.052558052 0.053836760 0.054739990 0.056493413 0.056842816 0.056989422 0.057284593 0.057711144 0.058528784 0.059219462 0.059393589 0.060436180 0.060620334 0.061472487 0.061645270 0.062562608 0.063984950 0.064559221 0.064770788 0.065691800 0.067787963 0.068341368 0.069758783 0.071837666 0.072663655 0.076463392 0.078165313 0.080475833 0.081652110 0.082264448 0.087207492 0.089480446 0.090818252 0.092838643 0.093314251 0.094207161 0.095260233 0.095389030 0.096428752 0.096542331 0.097288542 0.098749239 0.099443615 0.100961662 0.101229285 0.102417792 0.102696104 0.103808884 0.103852613 0.105960215 0.106864848 0.108205167 0.108414430 0.110000869 0.110336241 0.112565011 0.113674676 0.115992693 0.116487025 0.117312279 0.120459669 0.122959292 0.126174889 0.127519641 0.128554407 0.130125122 0.132422183 0.133338198 0.135407979 0.136688773 0.142105209 0.144321169 0.144789167 0.145738686 0.146695873 0.152521887 0.156276337 0.157289995 0.162495643 0.170420933 0.173984139 0.175970323 0.176634456 0.180481593 0.183233738 0.185592620 0.188022225 0.188480522 0.196217783 0.201790245 0.204953958 0.205239977 0.206782441 0.207152415 0.209062039 0.210672349 0.212696833 0.215433920 0.215587573 0.220124032 0.224810986 0.231514449 0.232681726 0.233591794 0.235079353 0.244468365 0.248858492 0.254505081 0.255292027 0.256706766 0.258807063 0.271368881 0.277437972 0.290035318 0.296171200 0.297507093 0.299353922 0.304124616 0.306158092 0.307533104 0.314477656 0.320563997 0.322774621 0.326034805 0.328807819 0.345610247 0.350208695 0.350816169 0.354697582 0.359110880 0.363806236 0.379971726 0.380580233 0.390565880 0.399825311 0.406216728 0.428515139 0.430120204 0.444865891 0.463755924 0.463866038 0.477815675 0.477896447 0.482412009 0.486499787 0.498023158 0.509526620 0.542163985 0.564483175 0.566755046 0.577653504 0.583289878 0.604286120 0.632297392 0.643473292 0.649429426 0.665324651 0.671386488 0.681352108 0.682800081 0.691621130 0.697593199 0.704240602 0.705270183 0.714034470 0.719506006 0.737201136 0.750679854 0.771573676 0.775836815 0.800941479 0.816506656 0.819538181 0.820398983 0.824135978 0.828069673 0.831001780 0.835185591 0.840493485 0.843051414 0.845156283 0.848878175 0.857651203 0.858627028 0.867339754 0.871425222 0.872130511 0.875875876 0.887129869 0.888959827 0.893668361 0.915514137 0.919145853 0.923915635 0.931207119 0.934656684 0.958029988 0.958436622 0.969339947 0.975848570 0.989195371 0.999616575 1.012997108 1.034027575 1.042609797 1.049224377 1.055236154 1.073670894 1.084189135 1.088653925 1.109990549 1.110585319 1.116143246 1.122411862 1.123318575 1.134067646 1.142458429 1.161171635 1.168740584 1.172600747 1.173231388 1.200403027 1.204206041 1.215385477 1.247262471 1.291433747 1.295658044 1.303843820 1.314468060 1.326276751 1.326818696 1.330136989 1.334433477 1.340925920 1.345783678 1.362020014 1.367624244 1.378774157 1.380886889 1.381294630 1.385166838 1.557444605 1.671844717 1.787014863</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">54</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93391094" y3="-0.95383029" z3="-0.66112477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6353774" y3="-1.947257" z3="-1.49373659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11614539" y3="-0.99284115" z3="-1.36298551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79753637" y3="1.47940882" z3="-1.03769029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29877002" y3="0.31078801" z3="-0.48789113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67726689" y3="2.73278676" z3="-1.18106297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01862667" y3="2.73552421" z3="-0.84110412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37558509" y3="4.99431063" z3="-0.42917129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82029689" y3="3.84704632" z3="-0.94518639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74339778" y3="5.87065012" z3="-0.25538738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12871375" y3="1.60256298" z3="-1.7136477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12387341" y3="0.35288678" z3="0.20605003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72753684" y3="0.37906797" z3="-0.6793097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60575023" y3="0.73408975" z3="0.22583106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69219481" y3="-0.86312716" z3="-1.54164055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08642509" y3="-2.46485085" z3="-1.35068211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.89324591" y3="-5.46492903" z3="-6.3349454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.65115839" y3="-5.03264407" z3="-5.359849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01183442" y3="-3.89811419" z3="-2.88412534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.62103136" y3="-3.65233906" z3="-5.20890993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.39208477" y3="-5.86183595" z3="-4.26582474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.08647858" y3="-5.28850072" z3="-3.03770926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31087378" y3="-3.0536832" z3="-3.97765126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83106906" y3="-2.98315996" z3="-6.04691159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.44098529" y3="-6.94927996" z3="-4.36331061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92012095" y3="-5.92336548" z3="-2.163275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63261155" y3="-3.35279536" z3="-1.63070482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35888404" y3="-3.83345689" z3="-0.87190343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70865023" y3="-4.8345707" z3="-1.13746108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37398023" y3="-3.53299563" z3="0.57746423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3864121" y3="-3.05520165" z3="3.33595624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67539409" y3="-4.56649101" z3="1.47258039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09646806" y3="-2.25614027" z3="1.0752039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1006027" y3="-2.01924962" z3="2.44542235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67264644" y3="-4.329897" z3="2.84610795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87116504" y3="-5.57445478" z3="1.09509136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1081834" y3="-1.41683035" z3="0.40952268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12870237" y3="-1.01147618" z3="2.80192899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87372643" y3="-5.15360789" z3="3.53616251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37870011" y3="-2.87308312" z3="4.41460385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2627171" y3="-1.71769433" z3="-3.94146587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43286625" y3="-1.31906477" z3="-3.04207811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35444727" y3="3.69654495" z3="-1.13218839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15213434" y3="-2.95924264" z3="-1.6916093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92351343" y3="-3.15521224" z3="-0.54153556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10071329" y3="-2.29679257" z3="0.40880974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82506195" y3="-0.73700855" z3="0.69996884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.78990675" y3="-0.30593517" z3="-0.83666709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51500262" y3="0.47825765" z3="1.19607993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.9640349" y3="-1.08550866" z3="2.14205854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40412895" y3="-4.37110793" z3="-0.31956496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11303371" y3="-4.62792238" z3="0.88245825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.14185246" y3="-0.0734687" z3="-1.69618892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40237982" y3="0.59334734" z3="-0.64503571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.4731001" y3="-1.12700421" z3="-1.13139708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62855815" y3="0.54228615" z3="0.5419367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15016234" y3="0.24645487" z3="2.20914551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98680347" y3="1.47688998" z3="1.22763826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.41403914" y3="-0.14895623" z3="2.50894391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.79170673" y3="-1.76830862" z3="1.86517827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.4066426" y3="-1.54107239" z3="2.99268181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0487063" y3="-4.04690401" z3="0.91382207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49809509" y3="-4.38730608" z3="1.76174432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34371142" y3="-5.70004128" z3="0.86056522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2831458" y3="-2.19751405" z3="-0.1724161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13255282" y3="-3.28066247" z3="-1.05018389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48025688" y3="-4.44100527" z3="-0.65094365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98691909" y3="-4.51400463" z3="0.64641931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14070591" y3="-3.46893869" z3="1.55252475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7807184" y3="-2.30936549" z3="1.1333761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49043129" y3="-3.19548102" z3="-2.07946985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33130839" y3="-5.27022015" z3="-1.34331432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24782212" y3="-5.70672977" z3="1.06203387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73408905" y3="-3.56295299" z3="2.56054822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87781606" y3="-1.47033575" z3="1.82411516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49973638" y3="4.03158446" z3="-0.07278859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86641079" y3="3.80000535" z3="-0.1538547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37623497" y3="3.2278068" z3="-1.31438072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56191467" y3="2.91808102" z3="-2.40072466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19676296" y3="3.15387142" z3="-2.3023697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07667706" y3="4.43192409" z3="0.85187621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53287003" y3="4.03127936" z3="0.67767389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80498743" y3="2.90956126" z3="-1.38170645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.9989323" y3="2.48202416" z3="-3.29970294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45460284" y3="2.88805676" z3="-3.13634976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15615945" y3="-5.93459519" z3="2.24727909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75100097" y3="-6.39627668" z3="0.19022776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2565092" y3="2.54091718" z3="-2.4425457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45775327" y3="3.0136197" z3="-0.36082473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6718162" y3="0.17077427" z3="-1.95505088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99181394" y3="1.41686472" z3="-1.82815754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.87249939" y3="0.10340861" z3="-2.71448595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.36679267" y3="1.21395926" z3="-3.35230976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.39056489" y3="-0.85748912" z3="-2.79135251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.28840653" y3="1.15011125" z3="-3.9374425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51232654" y3="2.54046567" z3="-2.52974275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6673905" y3="2.44185609" z3="-3.26780629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97898639" y3="3.4920708" z3="-2.48475089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.04601717" y3="3.31906639" z3="-3.80002329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57353449" y3="3.91094013" z3="-0.2355125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74761382" y3="5.06166386" z3="-0.07294905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90988894" y3="3.97021576" z3="0.25099513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40925665" y3="5.12034678" z3="0.81345999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54334426" y3="3.08391439" z3="0.17973367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43904148" y3="5.13984476" z3="1.18128695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29750706" y3="6.2419676" z3="0.49951515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60125833" y3="6.2771179" z3="0.92781206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65500363" y3="7.12169221" z3="0.60429417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.01252676" y3="7.18850822" z3="1.37061562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38552251" y3="-3.88846528" z3="-2.86656643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55280848" y3="-4.93133004" z3="-2.55661917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27211697" y3="-3.56117639" z3="-3.44206129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52368101" y3="-3.86367906" z3="-3.55203537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72101996" y3="-1.56528278" z3="-2.06018336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46477098" y3="-1.0844357" z3="-2.72488559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55281019" y3="-0.91224256" z3="-1.18842673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77483724" y3="-1.60101463" z3="-2.62591271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9339,-.9538,-.6611;6.6354,-1.9473,-1.4937;6.1161,-.9928,-1.363;4.7975,1.4794,-1.0377;4.2988,.3108,-.4879;2.6773,2.7328,-1.1811;4.0186,2.7355,-.8411;2.3756,4.9943,-.4292;1.8203,3.847,-.9452;1.7434,5.8707,-.2554;2.1287,1.6026,-1.7136;3.1239,.3529,.2061;1.7275,.3791,-.6793;.6058,.7341,.2258;1.6922,-.8631,-1.5416;1.0864,-2.4649,-1.3507;1.8932,-5.4649,-6.3349;1.6512,-5.0326,-5.3598;1.0118,-3.8981,-2.8841;1.621,-3.6523,-5.2089;1.3921,-5.8618,-4.2658;1.0865,-5.2885,-3.0377;1.3109,-3.0537,-3.9777;1.8311,-2.9832,-6.0469;1.441,-6.9493,-4.3633;.9201,-5.9234,-2.1633;.6326,-3.3528,-1.6307;-.3589,-3.8335,-.8719;-.7087,-4.8346,-1.1375;-.374,-3.533,.5775;-.3864,-3.0552,3.336;-.6754,-4.5665,1.4726;-.0965,-2.2561,1.0752;-.1006,-2.0192,2.4454;-.6726,-4.3299,2.8461;-.8712,-5.5745,1.0951;.1082,-1.4168,.4095;.1287,-1.0115,2.8019;-.8737,-5.1536,3.5362;-.3787,-2.8731,4.4146;1.2627,-1.7177,-3.9415;1.4329,-1.3191,-3.0421;.3544,3.6965,-1.1322;-2.1521,-2.9592,-1.6916;-2.9235,-3.1552,-.5415;-3.1007,-2.2968,.4088;-3.8251,-.737,.7;-4.7899,-.3059,-.8367;-2.515,.4783,1.1961;-4.964,-1.0855,2.1421;-3.4041,-4.3711,-.3196;-4.113,-4.6279,.8825;-4.1419,-.0735,-1.6962;-5.4024,.5933,-.645;-5.4731,-1.127,-1.1314;-1.6286,.5423,.5419;-2.1502,.2465,2.2091;-2.9868,1.4769,1.2276;-5.414,-.149,2.5089;-5.7917,-1.7683,1.8652;-4.4066,-1.5411,2.9927;-5.0487,-4.0469,.9138;-3.4981,-4.3873,1.7617;-4.3437,-5.7,.8606;4.2831,-2.1975,-.1724;4.1326,-3.2807,-1.0502;3.4803,-4.441,-.6509;2.9869,-4.514,.6464;3.1407,-3.4689,1.5525;3.7807,-2.3094,1.1334;4.4904,-3.1955,-2.0795;3.3313,-5.2702,-1.3433;2.2478,-5.7067,1.062;2.7341,-3.563,2.5605;3.8778,-1.4703,1.8241;-.4997,4.0316,-.0728;-1.8664,3.8,-.1539;-2.3762,3.2278,-1.3144;-1.5619,2.9181,-2.4007;-.1968,3.1539,-2.3024;-.0767,4.4319,.8519;-2.5329,4.0313,.6777;-3.805,2.9096,-1.3817;-1.9989,2.482,-3.2997;.4546,2.8881,-3.1363;2.1562,-5.9346,2.2473;1.751,-6.3963,.1902;-4.2565,2.5409,-2.4425;-4.4578,3.0136,-.3608;6.6718,.1708,-1.9551;5.9918,1.4169,-1.8282;7.8725,.1034,-2.7145;8.3668,1.214,-3.3523;8.3906,-.8575,-2.7914;9.2884,1.1501,-3.9374;6.5123,2.5405,-2.5297;7.6674,2.4419,-3.2678;5.979,3.4921,-2.4848;8.046,3.3191,-3.8;4.5735,3.9109,-.2355;3.7476,5.0617,-.0729;5.9099,3.9702,.251;6.4093,5.1203,.8135;6.5433,3.0839,.1797;7.439,5.1398,1.1813;4.2975,6.242,.4995;5.6013,6.2771,.9278;3.655,7.1217,.6043;6.0125,7.1885,1.3706;-2.3855,-3.8885,-2.8666;-2.5528,-4.9313,-2.5566;-3.2721,-3.5612,-3.4421;-1.5237,-3.8637,-3.552;-1.721,-1.5653,-2.0602;-2.4648,-1.0844,-2.7249;-1.5528,-.9122,-1.1884;-.7748,-1.601,-2.6259;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662729997617</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009621124736 0.001166806104 0.031750476239 0.005337916333</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043688254 -0.006167608 0.000130297 0.000196578 0.000259102 0.000316044 0.000331506 0.000405739 0.000434535 0.000532168 0.000646603 0.000770590 0.000799664 0.000903020 0.000941856 0.001062143 0.001170663 0.001217343 0.001258071 0.001302524 0.001436489 0.001466757 0.001519285 0.001741113 0.001808511 0.002140290 0.002293896 0.002489857 0.003050165 0.003210299 0.003632603 0.003957251 0.004334278 0.004453920 0.004724338 0.005146924 0.005589670 0.005593936 0.006175213 0.006757246 0.007064875 0.007432997 0.007925256 0.008346899 0.008749618 0.009119731 0.009406613 0.010012205 0.010246773 0.010919637 0.012535844 0.012804776 0.013363812 0.014309283 0.014526954 0.014842214 0.015247719 0.015449256 0.016029757 0.016387747 0.016538470 0.017737529 0.018369954 0.018876521 0.020343895 0.020593843 0.021456797 0.022208155 0.023029210 0.023361955 0.024552712 0.025570012 0.025991065 0.026255604 0.026638433 0.026953584 0.027767529 0.029804258 0.030424365 0.031615191 0.032279642 0.032734478 0.034856189 0.036332887 0.038261538 0.039331648 0.040022489 0.040429583 0.040975282 0.041844987 0.044662992 0.045290112 0.046152615 0.049321010 0.049669693 0.050680704 0.051379334 0.051574625 0.051804554 0.052281790 0.052388341 0.052558320 0.053837438 0.054740126 0.056493414 0.056842851 0.056989602 0.057284980 0.057711302 0.058529685 0.059219398 0.059445558 0.060435939 0.060620325 0.061482830 0.061849223 0.062694237 0.064555941 0.064769497 0.065688026 0.067117965 0.067787992 0.068452993 0.070040958 0.071838186 0.072663624 0.076463810 0.078167856 0.080476596 0.081719156 0.082264596 0.087208756 0.089480433 0.090818228 0.092838948 0.093314935 0.094207397 0.095260607 0.095410187 0.096439103 0.096555626 0.097288239 0.098911195 0.099443473 0.100966005 0.101229269 0.102418124 0.102696285 0.103829379 0.103861122 0.106415491 0.106891019 0.108217089 0.108638312 0.110034330 0.110344591 0.112568211 0.113713546 0.115996319 0.116488839 0.117312399 0.120539285 0.122962286 0.126185161 0.127520506 0.128560226 0.130126244 0.132484215 0.133337542 0.135406518 0.136693478 0.142105407 0.144404576 0.144957973 0.145758584 0.146694789 0.152521945 0.157289957 0.157710493 0.162490184 0.170422615 0.173992766 0.175979573 0.176645244 0.180483819 0.183234058 0.185592308 0.188030286 0.188485376 0.196251761 0.201790725 0.204953931 0.205251489 0.206782634 0.207152760 0.209062161 0.210679502 0.212701996 0.215526237 0.215659925 0.220166390 0.224811700 0.231515231 0.232685855 0.233593128 0.235079982 0.244469664 0.248858454 0.254505222 0.255296585 0.256706895 0.258807192 0.271369194 0.277442759 0.290035351 0.296177548 0.297546590 0.299357878 0.304129281 0.306159381 0.307533155 0.314793566 0.320563995 0.322774635 0.326168898 0.328807820 0.345611682 0.350395158 0.351216046 0.354698221 0.359118387 0.363807352 0.380550901 0.380807388 0.392484938 0.399954106 0.406251740 0.428738503 0.430120492 0.444872500 0.463763833 0.463867220 0.477819197 0.477896854 0.482458865 0.486502631 0.498023259 0.509549839 0.542175270 0.564503223 0.566755483 0.577759423 0.583290352 0.604290695 0.632903844 0.643488289 0.652188549 0.665338405 0.671386796 0.681357310 0.684965204 0.691621126 0.698079312 0.704240600 0.705270179 0.714037773 0.720530275 0.737202439 0.750679866 0.771574052 0.775836812 0.800941559 0.816555910 0.819673529 0.820441097 0.825036076 0.830890818 0.835086268 0.837085621 0.840571629 0.844296714 0.847274611 0.848900216 0.857737510 0.858731079 0.867339754 0.871893818 0.872832088 0.875876095 0.887239839 0.888962327 0.893672917 0.915515747 0.919148780 0.923915627 0.931206919 0.934653717 0.958124189 0.958443725 0.969339892 0.975848827 0.989195719 0.999616607 1.012997367 1.034028133 1.042609819 1.049225501 1.055236143 1.073697651 1.084189209 1.088654023 1.109990548 1.110585318 1.116147265 1.122411864 1.123318573 1.134071706 1.142484783 1.161174382 1.168740595 1.172600865 1.173231462 1.200403057 1.204206243 1.215391641 1.247262973 1.291451028 1.295662304 1.304310535 1.314485422 1.326276850 1.326821887 1.330137006 1.334433530 1.340925967 1.345785946 1.362023007 1.368710420 1.378775468 1.380889843 1.381299869 1.385381385 1.557445312 1.671844731 1.787457247</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">55</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93123452" y3="-0.95414848" z3="-0.66450953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63107086" y3="-1.94753967" z3="-1.50055004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11208747" y3="-0.99313426" z3="-1.36876387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79475552" y3="1.47920027" z3="-1.04022551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29658355" y3="0.31056156" z3="-0.48998311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67494729" y3="2.73394134" z3="-1.17844309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01692317" y3="2.73553163" z3="-0.84098842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37585538" y3="4.99442881" z3="-0.42223043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81906057" y3="3.8483325" z3="-0.93922129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74440698" y3="5.87079097" z3="-0.24585316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12487984" y3="1.60465934" z3="-1.71150244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12278179" y3="0.35303309" z3="0.20579121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72524597" y3="0.38015002" z3="-0.67769899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60465375" y3="0.73469501" z3="0.22913658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68867371" y3="-0.86144056" z3="-1.54069095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0871992" y3="-2.46532109" z3="-1.34940006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.90245334" y3="-5.46945148" z3="-6.32978638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.6588048" y3="-5.03654465" z3="-5.35535205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01551417" y3="-3.90027549" z3="-2.88126165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.62806243" y3="-3.65615016" z3="-5.20542457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.39826671" y3="-5.86496785" z3="-4.26109565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09072005" y3="-5.29077932" z3="-3.03384901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3158914" y3="-3.05665714" z3="-3.97508195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83907507" y3="-2.98749153" z3="-6.04359548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.44757774" y3="-6.95247573" z3="-4.35770439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92332042" y3="-5.9250834" z3="-2.15921065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63477682" y3="-3.35401844" z3="-1.62880089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35846241" y3="-3.83358627" z3="-0.8708127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70569606" y3="-4.83628499" z3="-1.13481288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37288557" y3="-3.53329973" z3="0.57891614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38601982" y3="-3.0536927" z3="3.33719927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67294989" y3="-4.5665857" z3="1.4747722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09689573" y3="-2.25597971" z3="1.07588183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10134211" y3="-2.0180813" z3="2.44595765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67064209" y3="-4.32909137" z3="2.84815277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86759321" y3="-5.57499219" z3="1.097938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10645713" y3="-1.41671738" z3="0.40960183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12669874" y3="-1.00963013" z3="2.80166899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87088578" y3="-5.15248118" z3="3.53876283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37869106" y3="-2.87077512" z3="4.41566668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26735458" y3="-1.72063727" z3="-3.94019856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43458433" y3="-1.32077508" z3="-3.04086933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35284659" y3="3.69944062" z3="-1.12448098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1485649" y3="-2.96419753" z3="-1.69059425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92221095" y3="-3.15637486" z3="-0.54099044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0993525" y3="-2.29841897" z3="0.40901626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82846722" y3="-0.73657614" z3="0.69244572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.78243204" y3="-0.30285439" z3="-0.85192271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51629125" y3="0.47700069" z3="1.19481344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.978315" y3="-1.08495548" z3="2.13055701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40635348" y3="-4.36787762" z3="-0.32094774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11167871" y3="-4.62556027" z3="0.88463224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.13169436" y3="-0.06784393" z3="-1.70778479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39842667" y3="0.5955945" z3="-0.66239708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.45841578" y3="-1.12328005" z3="-1.14343605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62154855" y3="0.53842835" z3="0.5447015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15774355" y3="0.244646" z3="2.21441913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98774967" y3="1.47873946" z3="1.22171844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.43054237" y3="-0.14024565" z3="2.48878113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.79924898" y3="-1.76787475" z3="1.85221867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.41659976" y3="-1.52988995" z3="2.96093133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0482605" y3="-4.04509427" z3="0.91700367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49235933" y3="-4.38108399" z3="1.76227741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34117201" y3="-5.69982249" z3="0.86743659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28178534" y3="-2.19792237" z3="-0.1743124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13254782" y3="-3.28245328" z3="-1.05063967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48186613" y3="-4.44316663" z3="-0.64983461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98841875" y3="-4.51504347" z3="0.64752377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14095695" y3="-3.46862681" z3="1.55228981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77967508" y3="-2.30886715" z3="1.13171941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49019849" y3="-3.19824887" z3="-2.0800895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33413156" y3="-5.27350013" z3="-1.34111091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25032577" y3="-5.7079094" z3="1.06452117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73443077" y3="-3.56179353" z3="2.56043087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87601039" y3="-1.46906749" z3="1.82159758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49968292" y3="4.03240465" z3="-0.06311364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86672441" y3="3.80281357" z3="-0.14326699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37845837" y3="3.23462255" z3="-1.30469462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56600282" y3="2.92769623" z3="-2.39340891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20039542" y3="3.16110061" z3="-2.29576519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07509977" y3="4.42940355" z3="0.86222013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53213917" y3="4.03271494" z3="0.68928828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80757028" y3="2.91869247" z3="-1.37134445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.00500921" y3="2.49588491" z3="-3.29373992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44961184" y3="2.89710948" z3="-3.13137246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15875645" y3="-5.93437352" z3="2.25000526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75409508" y3="-6.39895127" z3="0.19358453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.26297446" y3="2.56071174" z3="-2.43675984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45830877" y3="3.01632221" z3="-0.34808331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66669607" y3="0.17042697" z3="-1.96190777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9873697" y3="1.41667097" z3="-1.83310926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.86559837" y3="0.10295679" z3="-2.72414937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.35873355" y3="1.21358993" z3="-3.36273644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.38316978" y3="-0.85807895" z3="-2.80260968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.27890268" y3="1.14963751" z3="-3.95013129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50671999" y3="2.54045617" z3="-2.53523931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.66002606" y3="2.44173977" z3="-3.27603134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97382325" y3="3.49223649" z3="-2.48848025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.03776747" y3="3.31903934" z3="-3.80873377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57364057" y3="3.90969084" z3="-0.23468827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74858391" y3="5.06050976" z3="-0.06846541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91102937" y3="3.96746896" z3="0.24916595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41204031" y3="5.11633936" z3="0.81273667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54394889" y3="3.08101371" z3="0.17498642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44258102" y3="5.13470015" z3="1.17850885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30015056" y3="6.23950041" z3="0.50508593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60476556" y3="6.27324379" z3="0.93088331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65825896" y3="7.11932208" z3="0.61277258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.01731554" y3="7.18360716" z3="1.37460654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38260571" y3="-3.89547445" z3="-2.86376177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55103061" y3="-4.93732601" z3="-2.55190067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26841841" y3="-3.56868917" z3="-3.44030962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52029402" y3="-3.872779" z3="-3.5488405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71926619" y3="-1.57017244" z3="-2.06406695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46247725" y3="-1.09110028" z3="-2.72522478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5488272" y3="-0.91670893" z3="-1.19552465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77525636" y3="-1.60584189" z3="-2.63044628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9312,-.9541,-.6645;6.6311,-1.9475,-1.5006;6.1121,-.9931,-1.3688;4.7948,1.4792,-1.0402;4.2966,.3106,-.49;2.6749,2.7339,-1.1784;4.0169,2.7355,-.841;2.3759,4.9944,-.4222;1.8191,3.8483,-.9392;1.7444,5.8708,-.2459;2.1249,1.6047,-1.7115;3.1228,.353,.2058;1.7252,.3802,-.6777;.6047,.7347,.2291;1.6887,-.8614,-1.5407;1.0872,-2.4653,-1.3494;1.9025,-5.4695,-6.3298;1.6588,-5.0365,-5.3554;1.0155,-3.9003,-2.8813;1.6281,-3.6562,-5.2054;1.3983,-5.865,-4.2611;1.0907,-5.2908,-3.0338;1.3159,-3.0567,-3.9751;1.8391,-2.9875,-6.0436;1.4476,-6.9525,-4.3577;.9233,-5.9251,-2.1592;.6348,-3.354,-1.6288;-.3585,-3.8336,-.8708;-.7057,-4.8363,-1.1348;-.3729,-3.5333,.5789;-.386,-3.0537,3.3372;-.6729,-4.5666,1.4748;-.0969,-2.256,1.0759;-.1013,-2.0181,2.446;-.6706,-4.3291,2.8482;-.8676,-5.575,1.0979;.1065,-1.4167,.4096;.1267,-1.0096,2.8017;-.8709,-5.1525,3.5388;-.3787,-2.8708,4.4157;1.2674,-1.7206,-3.9402;1.4346,-1.3208,-3.0409;.3528,3.6994,-1.1245;-2.1486,-2.9642,-1.6906;-2.9222,-3.1564,-.541;-3.0994,-2.2984,.409;-3.8285,-.7366,.6924;-4.7824,-.3029,-.8519;-2.5163,.477,1.1948;-4.9783,-1.085,2.1306;-3.4064,-4.3679,-.3209;-4.1117,-4.6256,.8846;-4.1317,-.0678,-1.7078;-5.3984,.5956,-.6624;-5.4584,-1.1233,-1.1434;-1.6215,.5384,.5447;-2.1577,.2446,2.2144;-2.9877,1.4787,1.2217;-5.4305,-.1402,2.4888;-5.7992,-1.7679,1.8522;-4.4166,-1.5299,2.9609;-5.0483,-4.0451,.917;-3.4924,-4.3811,1.7623;-4.3412,-5.6998,.8674;4.2818,-2.1979,-.1743;4.1325,-3.2825,-1.0506;3.4819,-4.4432,-.6498;2.9884,-4.515,.6475;3.141,-3.4686,1.5523;3.7797,-2.3089,1.1317;4.4902,-3.1982,-2.0801;3.3341,-5.2735,-1.3411;2.2503,-5.7079,1.0645;2.7344,-3.5618,2.5604;3.876,-1.4691,1.8216;-.4997,4.0324,-.0631;-1.8667,3.8028,-.1433;-2.3785,3.2346,-1.3047;-1.566,2.9277,-2.3934;-.2004,3.1611,-2.2958;-.0751,4.4294,.8622;-2.5321,4.0327,.6893;-3.8076,2.9187,-1.3713;-2.005,2.4959,-3.2937;.4496,2.8971,-3.1314;2.1588,-5.9344,2.25;1.7541,-6.399,.1936;-4.263,2.5607,-2.4368;-4.4583,3.0163,-.3481;6.6667,.1704,-1.9619;5.9874,1.4167,-1.8331;7.8656,.103,-2.7241;8.3587,1.2136,-3.3627;8.3832,-.8581,-2.8026;9.2789,1.1496,-3.9501;6.5067,2.5405,-2.5352;7.66,2.4417,-3.276;5.9738,3.4922,-2.4885;8.0378,3.319,-3.8087;4.5736,3.9097,-.2347;3.7486,5.0605,-.0685;5.911,3.9675,.2492;6.412,5.1163,.8127;6.5439,3.081,.175;7.4426,5.1347,1.1785;4.3002,6.2395,.5051;5.6048,6.2732,.9309;3.6583,7.1193,.6128;6.0173,7.1836,1.3746;-2.3826,-3.8955,-2.8638;-2.551,-4.9373,-2.5519;-3.2684,-3.5687,-3.4403;-1.5203,-3.8728,-3.5488;-1.7193,-1.5702,-2.0641;-2.4625,-1.0911,-2.7252;-1.5488,-.9167,-1.1955;-.7753,-1.6058,-2.6304;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662778159549</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010831978543 0.000964421925 0.025508949481 0.005337825078</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043775897 -0.004703833 0.000130955 0.000196656 0.000259084 0.000321547 0.000331374 0.000406322 0.000435679 0.000533705 0.000646498 0.000770637 0.000799648 0.000909378 0.000957365 0.001063552 0.001182718 0.001219576 0.001258705 0.001305025 0.001437079 0.001482154 0.001528283 0.001746802 0.001819418 0.002142135 0.002300470 0.002516583 0.003051440 0.003213698 0.003674787 0.003958463 0.004339313 0.004453998 0.004729282 0.005165540 0.005589096 0.005592103 0.006174929 0.006757147 0.007065029 0.007433060 0.007928081 0.008357262 0.008762304 0.009122544 0.009405565 0.010022519 0.010262749 0.010944000 0.012535208 0.012812477 0.013374184 0.014308828 0.014525386 0.014842914 0.015248238 0.015449871 0.016029469 0.016387514 0.016545267 0.017736585 0.018370135 0.018876261 0.020348870 0.020647081 0.021480245 0.022208355 0.023029197 0.023366315 0.024556013 0.025762070 0.026003240 0.026555425 0.026705024 0.027203810 0.027767541 0.029808510 0.030424807 0.031635734 0.032298739 0.032737717 0.034863821 0.036352243 0.038264749 0.039333020 0.040026125 0.040570744 0.040976643 0.042068351 0.044660550 0.045289595 0.046152858 0.049668608 0.049813332 0.050681134 0.051379484 0.051574832 0.051804585 0.052281791 0.052388344 0.052558288 0.053837868 0.054740100 0.056493410 0.056842864 0.056989630 0.057285061 0.057711283 0.058530476 0.059219468 0.059438312 0.060435893 0.060620600 0.061484823 0.061963511 0.062820207 0.064556012 0.064772473 0.065696658 0.067773247 0.067905977 0.068774436 0.071043334 0.071846368 0.072663864 0.076463770 0.078169863 0.080481737 0.082059564 0.082277744 0.087209315 0.089480485 0.090819226 0.092839073 0.093315592 0.094207537 0.095260736 0.095440707 0.096447371 0.096608524 0.097292633 0.098932091 0.099443172 0.100982349 0.101230229 0.102418191 0.102699307 0.103831178 0.103860900 0.106411259 0.106898967 0.108218510 0.108677216 0.110046319 0.110347492 0.112569024 0.113720778 0.116012111 0.116491636 0.117312946 0.120729733 0.122961940 0.126184626 0.127522732 0.128559880 0.130183518 0.132531047 0.133337885 0.135425572 0.136695032 0.142105562 0.144419150 0.145028119 0.145769626 0.146693963 0.152522108 0.157290001 0.160709677 0.162763537 0.170423731 0.174031616 0.175996907 0.176809072 0.180484635 0.183235901 0.185595666 0.188057069 0.188516734 0.196275092 0.201792658 0.204956061 0.205266064 0.206783453 0.207153191 0.209062197 0.210682749 0.212704941 0.215546976 0.215870155 0.220207202 0.224811994 0.231515284 0.232687277 0.233593720 0.235080487 0.244469960 0.248862358 0.254505288 0.255297066 0.256707029 0.258807150 0.271369324 0.277444783 0.290035704 0.296180876 0.297577937 0.299358208 0.304129851 0.306160081 0.307533345 0.315052275 0.320564355 0.322775118 0.326270621 0.328807997 0.345611595 0.350420197 0.351330037 0.354698205 0.359126500 0.363807497 0.380568279 0.380978041 0.393717669 0.400245140 0.406288117 0.428775686 0.430120544 0.444872373 0.463764520 0.463868531 0.477819839 0.477896874 0.482466053 0.486506197 0.498023308 0.509549085 0.542176194 0.564502955 0.566755475 0.577756744 0.583290370 0.604291365 0.633530438 0.643488361 0.654314191 0.665356373 0.671393803 0.681359063 0.686867577 0.691621370 0.698312265 0.704240651 0.705270812 0.714070392 0.722916677 0.737202422 0.750679872 0.771574751 0.775836973 0.800950975 0.816577997 0.819710718 0.820453763 0.825747589 0.830927186 0.835106172 0.840282623 0.841264843 0.844699254 0.848875041 0.854438872 0.857780436 0.858922842 0.867339754 0.871891919 0.872938794 0.875881886 0.887427415 0.889021180 0.893674799 0.915752714 0.919153692 0.923915657 0.931209396 0.934760447 0.958141814 0.958448650 0.969347701 0.975848817 0.989197441 0.999616640 1.012998952 1.034028116 1.042609821 1.049225495 1.055236269 1.073815922 1.084189261 1.088655947 1.109990546 1.110585318 1.116167743 1.122411869 1.123318683 1.134087938 1.142581518 1.161182538 1.168740617 1.172600892 1.173231483 1.200403115 1.204206392 1.215400694 1.247264571 1.291526919 1.295662298 1.304331241 1.314486770 1.326276888 1.326822117 1.330137005 1.334435464 1.340928181 1.345785912 1.362037283 1.368773078 1.378775433 1.380890172 1.381301182 1.385411939 1.557446608 1.671845774 1.787757857</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">56</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92882812" y3="-0.95462408" z3="-0.66766493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.62699541" y3="-1.94796205" z3="-1.50722448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10823762" y3="-0.99358446" z3="-1.3743974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79210139" y3="1.4788209" z3="-1.04263512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29460135" y3="0.31014191" z3="-0.49191832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67271422" y3="2.73481119" z3="-1.17579796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01529724" y3="2.73534251" z3="-0.84080842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37617055" y3="4.99425529" z3="-0.41534587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81789742" y3="3.84930817" z3="-0.93336927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74540687" y3="5.87059649" z3="-0.23629218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12115924" y3="1.60633671" z3="-1.70924516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12185865" y3="0.35281869" z3="0.20559851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72308956" y3="0.38085215" z3="-0.67599966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60384005" y3="0.73461581" z3="0.23274887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6852028" y3="-0.8602988" z3="-1.53968228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08795016" y3="-2.46586962" z3="-1.34771038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.91241245" y3="-5.47415695" z3="-6.32418415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.66697802" y3="-5.04053092" z3="-5.35051243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01918221" y3="-3.90244505" z3="-2.8785538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.63566352" y3="-3.66005266" z3="-5.20173303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.40466486" y3="-5.868184" z3="-4.25606913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09483577" y3="-5.29307637" z3="-3.02986856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32124579" y3="-3.0595455" z3="-3.97239519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84800396" y3="-2.99199207" z3="-6.04003577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.45435462" y3="-6.9557617" z3="-4.35171647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92622027" y3="-5.92681338" z3="-2.15506203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63654166" y3="-3.35521681" z3="-1.62697983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35471719" y3="-3.83697988" z3="-0.86828492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70265109" y3="-4.8388189" z3="-1.13274397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37228114" y3="-3.53369843" z3="0.58048276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38578677" y3="-3.05206692" z3="3.33839275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67110887" y3="-4.56683807" z3="1.47712375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09825544" y3="-2.25525177" z3="1.07638731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10291818" y3="-2.01636845" z3="2.44626823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66883902" y3="-4.32834374" z3="2.85040375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86434927" y3="-5.57586318" z3="1.10104168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10439612" y3="-1.41641036" z3="0.40948014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12366334" y3="-1.00718677" z3="2.80110748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86797862" y3="-5.15162514" z3="3.54165469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37863788" y3="-2.86834353" z3="4.41678305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27256798" y3="-1.7236038" z3="-3.93890843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43660209" y3="-1.32239334" z3="-3.03952934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35126382" y3="3.70208374" z3="-1.1168713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14895777" y3="-2.96665025" z3="-1.69401855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92232832" y3="-3.15739475" z3="-0.54512422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10202211" y3="-2.29336908" z3="0.39996886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82863565" y3="-0.73377596" z3="0.68048952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.77735253" y3="-0.29865585" z3="-0.86252626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51774295" y3="0.47734447" z3="1.19164236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.98360138" y3="-1.07789991" z3="2.10904155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40282879" y3="-4.37252017" z3="-0.31688541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10864384" y3="-4.62397333" z3="0.8887728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.11913718" y3="-0.0556307" z3="-1.71315969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39823148" y3="0.59508735" z3="-0.67255583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.44861608" y3="-1.12355097" z3="-1.168945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62889246" y3="0.54476009" z3="0.54303432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15916077" y3="0.24103102" z3="2.20740545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98872049" y3="1.47410382" z3="1.22807747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.43450206" y3="-0.13486681" z3="2.46546997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.80599972" y3="-1.75791246" z3="1.83637576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.43542604" y3="-1.53079928" z3="2.96380413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04807278" y3="-4.04631869" z3="0.91666585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49027411" y3="-4.37248768" z3="1.76550982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33477089" y3="-5.69970763" z3="0.87696325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28064185" y3="-2.19842199" z3="-0.17587935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13260732" y3="-3.28434805" z3="-1.05071783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4833542" y3="-4.4453109" z3="-0.64831779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98969566" y3="-4.51591117" z3="0.64902916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14116768" y3="-3.46813883" z3="1.55242191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77880729" y3="-2.30833082" z3="1.13039447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49013799" y3="-3.20124419" z3="-2.08030481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33685333" y3="-5.27683924" z3="-1.33844148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25260283" y3="-5.70890363" z3="1.06751947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7347361" y3="-3.56036768" z3="2.56068983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87448017" y3="-1.46773774" z3="1.81938097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49947695" y3="4.03265555" z3="-0.05321514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86695266" y3="3.8053486" z3="-0.13253123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38118583" y3="3.24258856" z3="-1.29590213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57035736" y3="2.93782508" z3="-2.38636387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20415998" y3="3.16832291" z3="-2.28923003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07327186" y3="4.42640401" z3="0.87270429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53097999" y3="4.03339156" z3="0.70177611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81120692" y3="2.92967586" z3="-1.36254364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01081161" y3="2.50969235" z3="-3.28752441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44446729" y3="2.90626244" z3="-3.12659312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1615556" y3="-5.93428155" z3="2.25331702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75662248" y3="-6.401154" z3="0.19735736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.26953968" y3="2.58155146" z3="-2.43036475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45875145" y3="3.01794058" z3="-0.33482309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66167068" y3="0.1699307" z3="-1.96872126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98300106" y3="1.41631555" z3="-1.83799945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.85869651" y3="0.10237306" z3="-2.73390402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.35056155" y3="1.21308641" z3="-3.37334345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.37578829" y3="-0.85878538" z3="-2.81398756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.26921569" y3="1.1490427" z3="-3.96309424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50107402" y3="2.54028379" z3="-2.54076505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.65253484" y3="2.44147249" z3="-3.28440323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96859519" y3="3.4922183" z3="-2.49221845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.02931054" y3="3.31885648" z3="-3.81765549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57380748" y3="3.90830608" z3="-0.2338501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74957589" y3="5.05917634" z3="-0.06400899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91222242" y3="3.96469599" z3="0.24733389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41482843" y3="5.112362" z3="0.81194366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54464836" y3="3.07813377" z3="0.17027982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44611981" y3="5.12966174" z3="1.17565065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30276149" y3="6.2369225" z3="0.51056071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60823964" y3="6.26936265" z3="0.93382332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66145737" y3="7.1168222" z3="0.62110241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.02204241" y3="7.1787527" z3="1.37838245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37966228" y3="-3.90236579" z3="-2.8641825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54852637" y3="-4.94344438" z3="-2.54809214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26487875" y3="-3.57750712" z3="-3.44321107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51613579" y3="-3.88208429" z3="-3.54754038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71765661" y3="-1.57479186" z3="-2.06753175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46091762" y3="-1.0972398" z3="-2.73204708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54876832" y3="-0.91930597" z3="-1.19924809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77248441" y3="-1.61114362" z3="-2.63308921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9288,-.9546,-.6677;6.627,-1.948,-1.5072;6.1082,-.9936,-1.3744;4.7921,1.4788,-1.0426;4.2946,.3101,-.4919;2.6727,2.7348,-1.1758;4.0153,2.7353,-.8408;2.3762,4.9943,-.4153;1.8179,3.8493,-.9334;1.7454,5.8706,-.2363;2.1212,1.6063,-1.7092;3.1219,.3528,.2056;1.7231,.3809,-.676;.6038,.7346,.2327;1.6852,-.8603,-1.5397;1.088,-2.4659,-1.3477;1.9124,-5.4742,-6.3242;1.667,-5.0405,-5.3505;1.0192,-3.9024,-2.8786;1.6357,-3.6601,-5.2017;1.4047,-5.8682,-4.2561;1.0948,-5.2931,-3.0299;1.3212,-3.0595,-3.9724;1.848,-2.992,-6.04;1.4544,-6.9558,-4.3517;.9262,-5.9268,-2.1551;.6365,-3.3552,-1.627;-.3547,-3.837,-.8683;-.7027,-4.8388,-1.1327;-.3723,-3.5337,.5805;-.3858,-3.0521,3.3384;-.6711,-4.5668,1.4771;-.0983,-2.2553,1.0764;-.1029,-2.0164,2.4463;-.6688,-4.3283,2.8504;-.8643,-5.5759,1.101;.1044,-1.4164,.4095;.1237,-1.0072,2.8011;-.868,-5.1516,3.5417;-.3786,-2.8683,4.4168;1.2726,-1.7236,-3.9389;1.4366,-1.3224,-3.0395;.3513,3.7021,-1.1169;-2.149,-2.9667,-1.694;-2.9223,-3.1574,-.5451;-3.102,-2.2934,.4;-3.8286,-.7338,.6805;-4.7774,-.2987,-.8625;-2.5177,.4773,1.1916;-4.9836,-1.0779,2.109;-3.4028,-4.3725,-.3169;-4.1086,-4.624,.8888;-4.1191,-.0556,-1.7132;-5.3982,.5951,-.6726;-5.4486,-1.1236,-1.1689;-1.6289,.5448,.543;-2.1592,.241,2.2074;-2.9887,1.4741,1.2281;-5.4345,-.1349,2.4655;-5.806,-1.7579,1.8364;-4.4354,-1.5308,2.9638;-5.0481,-4.0463,.9167;-3.4903,-4.3725,1.7655;-4.3348,-5.6997,.877;4.2806,-2.1984,-.1759;4.1326,-3.2843,-1.0507;3.4834,-4.4453,-.6483;2.9897,-4.5159,.649;3.1412,-3.4681,1.5524;3.7788,-2.3083,1.1304;4.4901,-3.2012,-2.0803;3.3369,-5.2768,-1.3384;2.2526,-5.7089,1.0675;2.7347,-3.5604,2.5607;3.8745,-1.4677,1.8194;-.4995,4.0327,-.0532;-1.867,3.8053,-.1325;-2.3812,3.2426,-1.2959;-1.5704,2.9378,-2.3864;-.2042,3.1683,-2.2892;-.0733,4.4264,.8727;-2.531,4.0334,.7018;-3.8112,2.9297,-1.3625;-2.0108,2.5097,-3.2875;.4445,2.9063,-3.1266;2.1616,-5.9343,2.2533;1.7566,-6.4012,.1974;-4.2695,2.5816,-2.4304;-4.4588,3.0179,-.3348;6.6617,.1699,-1.9687;5.983,1.4163,-1.838;7.8587,.1024,-2.7339;8.3506,1.2131,-3.3733;8.3758,-.8588,-2.814;9.2692,1.149,-3.9631;6.5011,2.5403,-2.5408;7.6525,2.4415,-3.2844;5.9686,3.4922,-2.4922;8.0293,3.3189,-3.8177;4.5738,3.9083,-.2339;3.7496,5.0592,-.064;5.9122,3.9647,.2473;6.4148,5.1124,.8119;6.5446,3.0781,.1703;7.4461,5.1297,1.1757;4.3028,6.2369,.5106;5.6082,6.2694,.9338;3.6615,7.1168,.6211;6.022,7.1788,1.3784;-2.3797,-3.9024,-2.8642;-2.5485,-4.9434,-2.5481;-3.2649,-3.5775,-3.4432;-1.5161,-3.8821,-3.5475;-1.7177,-1.5748,-2.0675;-2.4609,-1.0972,-2.732;-1.5488,-.9193,-1.1992;-.7725,-1.6111,-2.6331;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662793385816</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009856885910 0.000972447218 0.030795704558 0.005337222050</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043811018 -0.005115607 0.000131283 0.000197224 0.000259310 0.000322815 0.000332136 0.000406443 0.000437543 0.000533713 0.000646714 0.000770892 0.000799887 0.000911061 0.000991534 0.001071575 0.001186223 0.001233145 0.001259160 0.001310190 0.001440341 0.001507031 0.001592893 0.001757263 0.001867853 0.002144718 0.002305338 0.002559585 0.003055440 0.003213789 0.003685653 0.003958722 0.004339793 0.004469725 0.004755588 0.005167008 0.005589964 0.005617426 0.006175802 0.006757080 0.007141539 0.007434890 0.007930115 0.008394910 0.008771424 0.009142049 0.009446465 0.010024644 0.010266822 0.010946895 0.012563750 0.012812228 0.013388882 0.014315078 0.014545114 0.014844280 0.015258766 0.015460318 0.016032114 0.016388825 0.016573649 0.017741134 0.018393390 0.018876449 0.020351503 0.020660192 0.021479409 0.022208901 0.023029194 0.023369813 0.024557004 0.025828412 0.026012513 0.026596175 0.026761936 0.027383041 0.027767523 0.029808197 0.030424825 0.031632555 0.032307771 0.032737769 0.034936419 0.036382240 0.038264280 0.039350183 0.040024378 0.040757549 0.040981164 0.042744791 0.045021505 0.045327529 0.046153223 0.049668444 0.049790189 0.050682317 0.051379710 0.051574800 0.051804635 0.052281796 0.052388344 0.052559452 0.053837861 0.054740336 0.056493419 0.056842899 0.056990043 0.057285092 0.057711583 0.058530346 0.059219376 0.059433927 0.060435767 0.060620801 0.061484561 0.062001425 0.062875452 0.064555977 0.064774270 0.065711875 0.067770918 0.067962345 0.068823936 0.071429755 0.071868234 0.072664048 0.076465079 0.078169613 0.080481463 0.082226962 0.082430764 0.087209293 0.089480724 0.090821900 0.092839144 0.093315706 0.094208202 0.095260735 0.095443640 0.096448637 0.096640462 0.097297497 0.098936255 0.099443058 0.101007689 0.101233047 0.102418246 0.102708227 0.103832437 0.103900561 0.106514555 0.106899689 0.108218255 0.108694537 0.110045384 0.110347323 0.112569041 0.113720585 0.116033318 0.116493437 0.117315772 0.120927279 0.122963236 0.126190387 0.127525308 0.128564633 0.130305887 0.132678944 0.133365772 0.135422527 0.136694740 0.142105679 0.144418554 0.145022670 0.145770682 0.146694121 0.152521259 0.157290505 0.161866270 0.165864027 0.170423740 0.174107047 0.176005733 0.177512341 0.180484511 0.183241019 0.185605161 0.188099578 0.188589427 0.196286376 0.201797429 0.204964947 0.205281812 0.206784119 0.207153501 0.209062264 0.210683949 0.212705455 0.215548856 0.216209368 0.220281214 0.224811980 0.231515287 0.232687198 0.233593687 0.235080604 0.244470391 0.248862247 0.254505258 0.255297448 0.256707011 0.258808432 0.271369315 0.277444982 0.290035729 0.296180661 0.297577661 0.299359006 0.304130699 0.306160363 0.307533331 0.315056648 0.320564616 0.322775531 0.326272120 0.328808112 0.345614525 0.350425161 0.351401442 0.354698484 0.359126297 0.363807878 0.380606173 0.381152066 0.394309193 0.400545419 0.406297845 0.428785586 0.430120546 0.444872736 0.463765077 0.463870684 0.477828309 0.477898517 0.482483791 0.486505741 0.498023303 0.509575091 0.542179881 0.564518195 0.566756107 0.577856959 0.583291740 0.604292105 0.633602272 0.643493439 0.655211628 0.665359712 0.671423103 0.681359148 0.687484993 0.691622312 0.698323425 0.704240815 0.705270980 0.714129634 0.726845305 0.737206478 0.750679872 0.771575455 0.775837207 0.800951915 0.816586381 0.819720703 0.820455063 0.826908841 0.830961676 0.835309894 0.840471083 0.842527104 0.844828890 0.848876901 0.857774130 0.858623898 0.861391991 0.867339770 0.871952027 0.873066262 0.875894227 0.887435785 0.889125965 0.893674757 0.915975089 0.919153431 0.923915666 0.931210865 0.934881954 0.958345229 0.958683767 0.969363435 0.975849506 0.989205702 0.999617078 1.013001106 1.034029576 1.042609813 1.049225486 1.055236285 1.073855878 1.084189524 1.088657418 1.109990595 1.110585319 1.116178880 1.122411871 1.123318684 1.134101322 1.142650910 1.161187186 1.168740632 1.172601415 1.173231479 1.200403156 1.204206543 1.215415384 1.247265103 1.291580856 1.295667561 1.304603306 1.314494188 1.326276878 1.326822283 1.330136991 1.334437700 1.340931311 1.345786165 1.362046826 1.369320300 1.378775865 1.380890604 1.381302657 1.385465668 1.557447609 1.671846610 1.787765173</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">57</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92661132" y3="-0.95507298" z3="-0.67102728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6230429" y3="-1.94825103" z3="-1.51440697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1044529" y3="-0.99393937" z3="-1.38045508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78939811" y3="1.47846159" z3="-1.0452846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2927543" y3="0.30972643" z3="-0.49398535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67030756" y3="2.73558438" z3="-1.17302466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01356235" y3="2.73512552" z3="-0.84073314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37626875" y3="4.99394144" z3="-0.40834906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81648868" y3="3.85012862" z3="-0.92724335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74619994" y3="5.87021799" z3="-0.22665433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11727228" y3="1.6079437" z3="-1.70674476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12122131" y3="0.35264571" z3="0.20553208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72104729" y3="0.38150003" z3="-0.67386927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60320501" y3="0.73466329" z3="0.2368554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68191263" y3="-0.85908833" z3="-1.5382135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08893687" y3="-2.46640874" z3="-1.34602039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.92314379" y3="-5.4787505" z3="-6.31839284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.67568075" y3="-5.04445745" z3="-5.34553823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02324925" y3="-3.90463322" z3="-2.87542456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.64382424" y3="-3.66390648" z3="-5.19779116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.41130518" y3="-5.87134169" z3="-4.25099768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09918782" y3="-5.29536117" z3="-3.02581789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32699466" y3="-3.0625036" z3="-3.96947179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85767716" y3="-2.99642743" z3="-6.03618313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.46132006" y3="-6.95898739" z3="-4.34570096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9291375" y3="-5.92851264" z3="-2.15087006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63931333" y3="-3.35697693" z3="-1.6244569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35312107" y3="-3.83744314" z3="-0.86692308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69966744" y3="-4.84046817" z3="-1.13041649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3714326" y3="-3.53426526" z3="0.58190363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38614975" y3="-3.05097614" z3="3.33949869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66927458" y3="-4.56715356" z3="1.47911208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09910377" y3="-2.25540482" z3="1.07713714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10411132" y3="-2.01572514" z3="2.44691571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6677624" y3="-4.32772074" z3="2.85217061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86146284" y3="-5.57656092" z3="1.10364387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10232804" y3="-1.4165819" z3="0.40976746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12150585" y3="-1.00631162" z3="2.80122232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8662307" y3="-5.15071417" z3="3.54382811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37921342" y3="-2.86668747" z3="4.41776872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27816686" y3="-1.72652664" z3="-3.93737998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43896111" y3="-1.32405045" z3="-3.03802296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34944902" y3="3.70448805" z3="-1.10892335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.146592" y3="-2.97073176" z3="-1.69373679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91987818" y3="-3.15794636" z3="-0.54284363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10178031" y3="-2.29176312" z3="0.39944903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82984912" y3="-0.73043705" z3="0.67826533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.76867861" y3="-0.29407936" z3="-0.87636653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52001052" y3="0.47694176" z3="1.19001929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.99439827" y3="-1.07557132" z3="2.10338873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.3983497" y3="-4.37220814" z3="-0.31242069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10681533" y3="-4.62164342" z3="0.89141853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.1093482" y3="-0.04531298" z3="-1.72147058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3968752" y3="0.59620135" z3="-0.68689137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.4349256" y3="-1.1184533" z3="-1.18749289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6253298" y3="0.5399996" z3="0.54132231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16376492" y3="0.23518098" z3="2.20587424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98755084" y3="1.48127048" z3="1.2216032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.45063074" y3="-0.13277313" z3="2.45602007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8167808" y3="-1.75855465" z3="1.80558006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.44479305" y3="-1.5215281" z3="2.94277919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0420628" y3="-4.04048387" z3="0.9198832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49203194" y3="-4.37650928" z3="1.76860527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33761709" y3="-5.69296984" z3="0.8760054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27981809" y3="-2.19889822" z3="-0.17747487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13286059" y3="-3.28627708" z3="-1.05070653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4850046" y3="-4.44742314" z3="-0.6465431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99130365" y3="-4.51666999" z3="0.65083918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1418175" y3="-3.46747479" z3="1.5527448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77839408" y3="-2.30766796" z3="1.12909848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49010463" y3="-3.20434007" z3="-2.08048692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33947341" y3="-5.28008182" z3="-1.33545441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25495919" y3="-5.70955007" z3="1.07083956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73550962" y3="-3.55861864" z3="2.56116626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87351436" y3="-1.46624495" z3="1.8171072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49959832" y3="4.03266051" z3="-0.0432452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86757877" y3="3.8077958" z3="-0.12182454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38396811" y3="3.24992316" z3="-1.28641592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.5746473" y3="2.94714586" z3="-2.37843009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20799893" y3="3.17510812" z3="-2.28216423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07153468" y3="4.42245086" z3="0.88367762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53020423" y3="4.03388852" z3="0.71421403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81464438" y3="2.94009652" z3="-1.35291397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01678463" y3="2.52283069" z3="-3.28052372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4392779" y3="2.9149537" z3="-3.12110752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16413719" y3="-5.93352441" z3="2.25688193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7591396" y3="-6.40301797" z3="0.20155981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.27315838" y3="2.59446339" z3="-2.41823497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46230509" y3="3.02831673" z3="-0.32823878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65651239" y3="0.16955823" z3="-1.97609364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.97844597" y3="1.41604306" z3="-1.84333098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.85150167" y3="0.10199255" z3="-2.74446803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.34188819" y3="1.21280997" z3="-3.38487103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.36815858" y3="-0.8592537" z3="-2.82629572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.25889581" y3="1.14872751" z3="-3.97718051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49503514" y3="2.54022233" z3="-2.54682147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.64449381" y3="2.44138986" z3="-3.29354635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96292163" y3="3.49227451" z3="-2.49636742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.02012802" y3="3.3188776" z3="-3.82743018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57386722" y3="3.9069133" z3="-0.23320221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75040178" y3="5.05776483" z3="-0.05962968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91337262" y3="3.96202547" z3="0.24511727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41756327" y3="5.10851607" z3="0.81068899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54537822" y3="3.07542726" z3="0.16509954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44965403" y3="5.12484729" z3="1.17217298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3051994" y3="6.23428928" z3="0.51588456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61158904" y3="6.26553497" z3="0.93642721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66442955" y3="7.11420609" z3="0.62938718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.02663156" y3="7.17397706" z3="1.3817641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37709172" y3="-3.90894145" z3="-2.86217362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54755742" y3="-4.94869129" z3="-2.54451369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26048284" y3="-3.58498428" z3="-3.44426133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51241039" y3="-3.89133842" z3="-3.54447111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7162568" y3="-1.57865266" z3="-2.07267138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45826956" y3="-1.10277516" z3="-2.74002574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54908728" y3="-0.920476" z3="-1.20552359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7694741" y3="-1.6173087" z3="-2.63609195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9266,-.9551,-.671;6.623,-1.9483,-1.5144;6.1045,-.9939,-1.3805;4.7894,1.4785,-1.0453;4.2928,.3097,-.494;2.6703,2.7356,-1.173;4.0136,2.7351,-.8407;2.3763,4.9939,-.4083;1.8165,3.8501,-.9272;1.7462,5.8702,-.2267;2.1173,1.6079,-1.7067;3.1212,.3526,.2055;1.721,.3815,-.6739;.6032,.7347,.2369;1.6819,-.8591,-1.5382;1.0889,-2.4664,-1.346;1.9231,-5.4788,-6.3184;1.6757,-5.0445,-5.3455;1.0232,-3.9046,-2.8754;1.6438,-3.6639,-5.1978;1.4113,-5.8713,-4.251;1.0992,-5.2954,-3.0258;1.327,-3.0625,-3.9695;1.8577,-2.9964,-6.0362;1.4613,-6.959,-4.3457;.9291,-5.9285,-2.1509;.6393,-3.357,-1.6245;-.3531,-3.8374,-.8669;-.6997,-4.8405,-1.1304;-.3714,-3.5343,.5819;-.3861,-3.051,3.3395;-.6693,-4.5672,1.4791;-.0991,-2.2554,1.0771;-.1041,-2.0157,2.4469;-.6678,-4.3277,2.8522;-.8615,-5.5766,1.1036;.1023,-1.4166,.4098;.1215,-1.0063,2.8012;-.8662,-5.1507,3.5438;-.3792,-2.8667,4.4178;1.2782,-1.7265,-3.9374;1.439,-1.3241,-3.038;.3494,3.7045,-1.1089;-2.1466,-2.9707,-1.6937;-2.9199,-3.1579,-.5428;-3.1018,-2.2918,.3994;-3.8298,-.7304,.6783;-4.7687,-.2941,-.8764;-2.52,.4769,1.19;-4.9944,-1.0756,2.1034;-3.3983,-4.3722,-.3124;-4.1068,-4.6216,.8914;-4.1093,-.0453,-1.7215;-5.3969,.5962,-.6869;-5.4349,-1.1185,-1.1875;-1.6253,.54,.5413;-2.1638,.2352,2.2059;-2.9876,1.4813,1.2216;-5.4506,-.1328,2.456;-5.8168,-1.7586,1.8056;-4.4448,-1.5215,2.9428;-5.0421,-4.0405,.9199;-3.492,-4.3765,1.7686;-4.3376,-5.693,.876;4.2798,-2.1989,-.1775;4.1329,-3.2863,-1.0507;3.485,-4.4474,-.6465;2.9913,-4.5167,.6508;3.1418,-3.4675,1.5527;3.7784,-2.3077,1.1291;4.4901,-3.2043,-2.0805;3.3395,-5.2801,-1.3355;2.255,-5.7096,1.0708;2.7355,-3.5586,2.5612;3.8735,-1.4662,1.8171;-.4996,4.0327,-.0432;-1.8676,3.8078,-.1218;-2.384,3.2499,-1.2864;-1.5746,2.9471,-2.3784;-.208,3.1751,-2.2822;-.0715,4.4225,.8837;-2.5302,4.0339,.7142;-3.8146,2.9401,-1.3529;-2.0168,2.5228,-3.2805;.4393,2.915,-3.1211;2.1641,-5.9335,2.2569;1.7591,-6.403,.2016;-4.2732,2.5945,-2.4182;-4.4623,3.0283,-.3282;6.6565,.1696,-1.9761;5.9784,1.416,-1.8433;7.8515,.102,-2.7445;8.3419,1.2128,-3.3849;8.3682,-.8593,-2.8263;9.2589,1.1487,-3.9772;6.495,2.5402,-2.5468;7.6445,2.4414,-3.2935;5.9629,3.4923,-2.4964;8.0201,3.3189,-3.8274;4.5739,3.9069,-.2332;3.7504,5.0578,-.0596;5.9134,3.962,.2451;6.4176,5.1085,.8107;6.5454,3.0754,.1651;7.4497,5.1248,1.1722;4.3052,6.2343,.5159;5.6116,6.2655,.9364;3.6644,7.1142,.6294;6.0266,7.174,1.3818;-2.3771,-3.9089,-2.8622;-2.5476,-4.9487,-2.5445;-3.2605,-3.585,-3.4443;-1.5124,-3.8913,-3.5445;-1.7163,-1.5787,-2.0727;-2.4583,-1.1028,-2.74;-1.5491,-.9205,-1.2055;-.7695,-1.6173,-2.6361;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662781082783</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008655903105 0.001110932936 0.025391290764 0.005337504471</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043808439 -0.006333493 0.000130749 0.000197095 0.000260235 0.000329857 0.000333950 0.000409230 0.000447320 0.000542844 0.000647715 0.000771538 0.000800129 0.000917169 0.000991118 0.001076548 0.001186652 0.001238473 0.001261419 0.001313081 0.001440086 0.001512260 0.001595911 0.001761010 0.001903329 0.002145931 0.002305856 0.002566191 0.003055140 0.003214161 0.003688778 0.003958783 0.004341532 0.004507024 0.004770253 0.005175031 0.005589955 0.005646499 0.006176554 0.006757057 0.007222117 0.007437860 0.007934274 0.008398995 0.008796217 0.009173739 0.009541789 0.010024464 0.010266909 0.011013651 0.012632740 0.012817973 0.013401664 0.014327662 0.014588647 0.014844753 0.015288941 0.015512969 0.016040558 0.016390995 0.016770885 0.017758358 0.018453276 0.018876804 0.020355575 0.020666754 0.021494050 0.022209002 0.023029172 0.023373132 0.024557622 0.025864942 0.026023390 0.026607072 0.026784501 0.027417972 0.027767679 0.029809005 0.030424803 0.031646527 0.032307128 0.032737948 0.035135653 0.036382067 0.038270367 0.039385322 0.040059490 0.040935569 0.040983266 0.043187169 0.045248997 0.046147553 0.046299753 0.049669165 0.050122172 0.050691649 0.051382861 0.051575781 0.051804662 0.052281815 0.052388335 0.052562315 0.053839545 0.054741073 0.056493420 0.056843208 0.056992727 0.057286717 0.057712353 0.058530711 0.059219345 0.059438358 0.060436161 0.060620983 0.061486390 0.061997511 0.062869671 0.064556061 0.064774430 0.065721626 0.067772700 0.068002240 0.068832412 0.071446225 0.071874247 0.072663999 0.076465960 0.078172160 0.080481981 0.082229940 0.082475646 0.087209892 0.089481037 0.090822676 0.092839760 0.093315884 0.094208149 0.095260762 0.095446070 0.096449144 0.096637381 0.097298181 0.098983455 0.099442693 0.101004393 0.101233006 0.102418410 0.102709430 0.103837835 0.103975147 0.106777454 0.106958830 0.108221015 0.108960636 0.110068657 0.110352172 0.112569045 0.113728433 0.116072168 0.116497705 0.117319944 0.121051771 0.122963833 0.126192130 0.127527323 0.128565456 0.130396951 0.132906464 0.133606543 0.135493942 0.136696757 0.142106055 0.144418005 0.145026016 0.145770435 0.146692927 0.152520512 0.157290859 0.162007920 0.170199035 0.170423752 0.174203444 0.176006000 0.179747818 0.180485516 0.183255423 0.185628160 0.188179929 0.188761745 0.196285998 0.201802933 0.204978714 0.205294618 0.206784130 0.207153617 0.209062258 0.210683991 0.212705474 0.215548786 0.216571987 0.220395956 0.224811995 0.231515356 0.232688239 0.233594610 0.235080640 0.244471439 0.248869523 0.254505959 0.255297873 0.256707008 0.258808571 0.271369828 0.277446501 0.290035766 0.296182623 0.297588368 0.299363605 0.304135664 0.306160755 0.307533437 0.315130113 0.320564931 0.322775753 0.326303392 0.328808524 0.345619461 0.350465768 0.352064408 0.354700542 0.359128850 0.363809751 0.380647459 0.381841922 0.394309131 0.400601103 0.406298109 0.428868878 0.430120518 0.444873484 0.463766805 0.463875515 0.477843316 0.477903786 0.482542004 0.486554085 0.498023340 0.509633822 0.542194625 0.564551829 0.566757395 0.578078383 0.583295826 0.604296548 0.633639324 0.643504227 0.655656290 0.665361989 0.671464736 0.681359392 0.687785631 0.691624446 0.698530503 0.704240991 0.705273742 0.714168341 0.729302497 0.737216817 0.750679873 0.771575791 0.775837400 0.800958036 0.816586436 0.819720544 0.820455768 0.828230807 0.831000993 0.836621317 0.840548085 0.843973745 0.844885328 0.848883164 0.857815578 0.858965494 0.866874558 0.867340055 0.872068363 0.874852438 0.875961132 0.887552421 0.889210695 0.893679656 0.916067490 0.919435549 0.923916188 0.931218106 0.934879351 0.958377454 0.959499139 0.969377307 0.975849915 0.989211814 0.999617253 1.013001478 1.034030743 1.042610020 1.049225923 1.055236706 1.073857630 1.084189669 1.088657553 1.109990610 1.110585318 1.116178994 1.122411888 1.123318712 1.134103554 1.142663005 1.161187533 1.168740727 1.172602036 1.173231490 1.200403188 1.204206839 1.215427969 1.247265526 1.291580032 1.295675262 1.305295853 1.314520928 1.326276980 1.326825060 1.330137036 1.334438570 1.340932303 1.345786222 1.362046855 1.371062154 1.378777408 1.380895318 1.381310291 1.385810631 1.557447612 1.671846705 1.787836786</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">58</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92460867" y3="-0.95536925" z3="-0.67415533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61929903" y3="-1.94838979" z3="-1.52129827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1008669" y3="-0.99414544" z3="-1.38628138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78684047" y3="1.47822721" z3="-1.0478896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29111321" y3="0.3094674" z3="-0.49588392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66800742" y3="2.73627663" z3="-1.17036231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01189183" y3="2.73498797" z3="-0.84075922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37614626" y3="4.99354378" z3="-0.40170672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81505378" y3="3.85070801" z3="-0.92130622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74667906" y3="5.86971445" z3="-0.21751383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11357824" y3="1.60939749" z3="-1.70430901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1207757" y3="0.35266537" z3="0.20562701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71930498" y3="0.38212251" z3="-0.67167185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60282515" y3="0.73482304" z3="0.24089554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67888087" y3="-0.8580171" z3="-1.53654785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08971459" y3="-2.46683308" z3="-1.34449038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.93417518" y3="-5.48329075" z3="-6.31250853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.6846457" y3="-5.04832692" z3="-5.34047723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02710031" y3="-3.90672221" z3="-2.87254082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.65237898" y3="-3.66768791" z3="-5.19378404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.41797105" y3="-5.87443589" z3="-4.24589793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.10336228" y3="-5.29757919" z3="-3.0217748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33290988" y3="-3.06538483" z3="-3.966582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.86789312" y3="-3.00078043" z3="-6.03219872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.46815142" y3="-6.96213935" z3="-4.33973903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93171929" y3="-5.93014766" z3="-2.14672354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64111287" y3="-3.35784041" z3="-1.62278254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35147001" y3="-3.83886118" z3="-0.86526554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69706582" y3="-4.8420584" z3="-1.12848285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37059975" y3="-3.5349636" z3="0.58336661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38665772" y3="-3.05057363" z3="3.34055725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66806216" y3="-4.56762135" z3="1.48070731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09935018" y3="-2.25587957" z3="1.07817349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10498793" y3="-2.01560917" z3="2.44774488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66721629" y3="-4.32765508" z3="2.85364955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85925411" y3="-5.57729869" z3="1.10554646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10168714" y3="-1.41743846" z3="0.41054007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11967814" y3="-1.00581586" z3="2.80162746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86542455" y3="-5.15038592" z3="3.54558645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3804204" y3="-2.86569211" z3="4.41870041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2838358" y3="-1.72943295" z3="-3.93572412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44140463" y3="-1.3258374" z3="-3.03633918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34769945" y3="3.70637845" z3="-1.10125253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14419774" y3="-2.97413594" z3="-1.69417321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91923234" y3="-3.15922133" z3="-0.54539197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09940112" y3="-2.29427096" z3="0.39760071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83025107" y3="-0.72957575" z3="0.66304966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.76211279" y3="-0.2896125" z3="-0.89057865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5182432" y3="0.47654741" z3="1.18860056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.00655336" y3="-1.07047822" z3="2.0792512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40284872" y3="-4.36922703" z3="-0.31644634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10777948" y3="-4.61858672" z3="0.89129753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0956751" y3="-0.03747986" z3="-1.73222142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38892889" y3="0.59928651" z3="-0.70110826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.42440415" y3="-1.11445659" z3="-1.20524501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62499141" y3="0.54328957" z3="0.54207786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16362935" y3="0.2323243" z3="2.20605812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98808721" y3="1.47495647" z3="1.22852591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.46185282" y3="-0.12736267" z3="2.43062878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.82120161" y3="-1.7516821" z3="1.80100328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.46796298" y3="-1.52063485" z3="2.94071225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04360911" y3="-4.03682202" z3="0.92162295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48671084" y3="-4.3690888" z3="1.76694582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33837438" y3="-5.6930656" z3="0.88121909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27924296" y3="-2.19922798" z3="-0.17880449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13323892" y3="-3.28803795" z3="-1.05043017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48664033" y3="-4.44927208" z3="-0.64449675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99289485" y3="-4.51708161" z3="0.65292623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14267323" y3="-3.46654644" z3="1.55337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77831643" y3="-2.30684302" z3="1.12809747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4901567" y3="-3.20731812" z3="-2.08042238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34197646" y3="-5.2830825" z3="-1.33218524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25714452" y3="-5.70978744" z3="1.0744866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73651131" y3="-3.55658009" z3="2.56194916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87297679" y3="-1.46459725" z3="1.81512389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49975852" y3="4.03256566" z3="-0.03378116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8680918" y3="3.80988431" z3="-0.11156552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38630792" y3="3.25623554" z3="-1.27707374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57876501" y3="2.95593209" z3="-2.37127017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21161075" y3="3.18113979" z3="-2.27544965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07028662" y3="4.41891229" z3="0.89377184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52965391" y3="4.03444238" z3="0.72556336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81713669" y3="2.94873169" z3="-1.34257928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.02287792" y3="2.53570415" z3="-3.27449988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.43465547" y3="2.92211061" z3="-3.11539251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16618304" y3="-5.93204724" z3="2.26077993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76189431" y3="-6.40482395" z3="0.20613882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28050207" y3="2.61738827" z3="-2.41527656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46171479" y3="3.02652428" z3="-0.31210525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65151993" y3="0.16930838" z3="-1.98331366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9740161" y3="1.41587487" z3="-1.84862374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.84447565" y3="0.10172732" z3="-2.75485082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.33333319" y3="1.21261925" z3="-3.39630648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.36074938" y3="-0.85957945" z3="-2.83832477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.24869706" y3="1.14849484" z3="-3.9911481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48906351" y3="2.54022546" z3="-2.55294115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6365176" y3="2.44136256" z3="-3.30272803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9572744" y3="3.49236939" z3="-2.50067042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.01096963" y3="3.31892498" z3="-3.83731958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57381788" y3="3.9057286" z3="-0.23279728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75099413" y3="5.05647531" z3="-0.05566288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91437353" y3="3.95975896" z3="0.242673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42001869" y3="5.10519535" z3="0.80904869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54601346" y3="3.07317185" z3="0.15986126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45288187" y3="5.12070794" z3="1.16833915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30727954" y3="6.231908" z3="0.52060783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61455764" y3="6.26214966" z3="0.93844513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66695953" y3="7.11176955" z3="0.63692316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03073715" y3="7.16973804" z3="1.3844406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37404638" y3="-3.91446178" z3="-2.86058031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54644596" y3="-4.95327939" z3="-2.54037412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25644707" y3="-3.59054071" z3="-3.44387272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50844377" y3="-3.89944201" z3="-3.54161691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71395916" y3="-1.58304103" z3="-2.07534122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45667311" y3="-1.10850668" z3="-2.74114864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54439034" y3="-0.92361175" z3="-1.21078331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76973496" y3="-1.62150847" z3="-2.6407506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9246,-.9554,-.6742;6.6193,-1.9484,-1.5213;6.1009,-.9941,-1.3863;4.7868,1.4782,-1.0479;4.2911,.3095,-.4959;2.668,2.7363,-1.1704;4.0119,2.735,-.8408;2.3761,4.9935,-.4017;1.8151,3.8507,-.9213;1.7467,5.8697,-.2175;2.1136,1.6094,-1.7043;3.1208,.3527,.2056;1.7193,.3821,-.6717;.6028,.7348,.2409;1.6789,-.858,-1.5365;1.0897,-2.4668,-1.3445;1.9342,-5.4833,-6.3125;1.6846,-5.0483,-5.3405;1.0271,-3.9067,-2.8725;1.6524,-3.6677,-5.1938;1.418,-5.8744,-4.2459;1.1034,-5.2976,-3.0218;1.3329,-3.0654,-3.9666;1.8679,-3.0008,-6.0322;1.4682,-6.9621,-4.3397;.9317,-5.9301,-2.1467;.6411,-3.3578,-1.6228;-.3515,-3.8389,-.8653;-.6971,-4.8421,-1.1285;-.3706,-3.535,.5834;-.3867,-3.0506,3.3406;-.6681,-4.5676,1.4807;-.0994,-2.2559,1.0782;-.105,-2.0156,2.4477;-.6672,-4.3277,2.8536;-.8593,-5.5773,1.1055;.1017,-1.4174,.4105;.1197,-1.0058,2.8016;-.8654,-5.1504,3.5456;-.3804,-2.8657,4.4187;1.2838,-1.7294,-3.9357;1.4414,-1.3258,-3.0363;.3477,3.7064,-1.1013;-2.1442,-2.9741,-1.6942;-2.9192,-3.1592,-.5454;-3.0994,-2.2943,.3976;-3.8303,-.7296,.663;-4.7621,-.2896,-.8906;-2.5182,.4765,1.1886;-5.0066,-1.0705,2.0793;-3.4028,-4.3692,-.3164;-4.1078,-4.6186,.8913;-4.0957,-.0375,-1.7322;-5.3889,.5993,-.7011;-5.4244,-1.1145,-1.2052;-1.625,.5433,.5421;-2.1636,.2323,2.2061;-2.9881,1.475,1.2285;-5.4619,-.1274,2.4306;-5.8212,-1.7517,1.801;-4.468,-1.5206,2.9407;-5.0436,-4.0368,.9216;-3.4867,-4.3691,1.7669;-4.3384,-5.6931,.8812;4.2792,-2.1992,-.1788;4.1332,-3.288,-1.0504;3.4866,-4.4493,-.6445;2.9929,-4.5171,.6529;3.1427,-3.4665,1.5534;3.7783,-2.3068,1.1281;4.4902,-3.2073,-2.0804;3.342,-5.2831,-1.3322;2.2571,-5.7098,1.0745;2.7365,-3.5566,2.5619;3.873,-1.4646,1.8151;-.4998,4.0326,-.0338;-1.8681,3.8099,-.1116;-2.3863,3.2562,-1.2771;-1.5788,2.9559,-2.3713;-.2116,3.1811,-2.2754;-.0703,4.4189,.8938;-2.5297,4.0344,.7256;-3.8171,2.9487,-1.3426;-2.0229,2.5357,-3.2745;.4347,2.9221,-3.1154;2.1662,-5.932,2.2608;1.7619,-6.4048,.2061;-4.2805,2.6174,-2.4153;-4.4617,3.0265,-.3121;6.6515,.1693,-1.9833;5.974,1.4159,-1.8486;7.8445,.1017,-2.7549;8.3333,1.2126,-3.3963;8.3607,-.8596,-2.8383;9.2487,1.1485,-3.9911;6.4891,2.5402,-2.5529;7.6365,2.4414,-3.3027;5.9573,3.4924,-2.5007;8.011,3.3189,-3.8373;4.5738,3.9057,-.2328;3.751,5.0565,-.0557;5.9144,3.9598,.2427;6.42,5.1052,.809;6.546,3.0732,.1599;7.4529,5.1207,1.1683;4.3073,6.2319,.5206;5.6146,6.2621,.9384;3.667,7.1118,.6369;6.0307,7.1697,1.3844;-2.374,-3.9145,-2.8606;-2.5464,-4.9533,-2.5404;-3.2564,-3.5905,-3.4439;-1.5084,-3.8994,-3.5416;-1.714,-1.583,-2.0753;-2.4567,-1.1085,-2.7411;-1.5444,-.9236,-1.2108;-.7697,-1.6215,-2.6408;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662786273200</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.012127794691 0.001194801293 0.031931776060 0.005337755848</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043828223 -0.006300324 0.000131444 0.000197525 0.000261950 0.000330500 0.000343266 0.000409728 0.000453167 0.000550350 0.000647419 0.000772022 0.000800082 0.000916625 0.001028549 0.001090663 0.001203950 0.001238337 0.001267762 0.001345780 0.001449250 0.001512559 0.001654798 0.001767252 0.001911561 0.002147433 0.002305986 0.002582683 0.003067464 0.003217494 0.003721898 0.003959666 0.004349838 0.004534429 0.004771020 0.005221404 0.005589991 0.005647184 0.006176392 0.006757010 0.007218880 0.007437603 0.007955478 0.008420197 0.008828583 0.009200301 0.009572434 0.010030237 0.010280388 0.011029913 0.012653827 0.012825146 0.013403065 0.014330744 0.014603341 0.014844556 0.015297336 0.015539924 0.016041262 0.016390862 0.016917557 0.017769061 0.018479038 0.018876687 0.020356124 0.020665258 0.021497886 0.022209056 0.023029403 0.023373747 0.024558163 0.025860654 0.026021371 0.026605954 0.026781705 0.027413970 0.027767875 0.029811672 0.030424822 0.031672949 0.032311663 0.032739547 0.035298424 0.036398551 0.038279553 0.039408010 0.040146688 0.040982304 0.041164775 0.043205515 0.045251037 0.046151578 0.046686774 0.049669338 0.050661085 0.051244630 0.051444638 0.051597092 0.051804982 0.052281882 0.052388364 0.052566730 0.053844433 0.054741099 0.056493410 0.056843650 0.056996431 0.057291416 0.057713670 0.058531201 0.059219565 0.059567123 0.060437568 0.060620934 0.061490423 0.062080130 0.062995464 0.064556611 0.064790588 0.065720555 0.067777115 0.068057643 0.068842682 0.071460737 0.071874090 0.072664055 0.076465835 0.078177729 0.080489651 0.082237815 0.082540578 0.087211788 0.089481001 0.090822790 0.092840214 0.093317660 0.094209306 0.095260805 0.095463740 0.096452456 0.096672440 0.097300449 0.098976567 0.099442435 0.101100559 0.101243806 0.102418375 0.102711773 0.103838995 0.103982383 0.106829218 0.107116166 0.108222569 0.109302915 0.110129452 0.110364269 0.112569197 0.113731569 0.116104319 0.116502417 0.117321804 0.121062738 0.122963831 0.126191810 0.127534088 0.128565355 0.130438828 0.133000591 0.134013564 0.135834140 0.136698920 0.142106563 0.144419000 0.145062480 0.145770173 0.146694582 0.152519989 0.157291003 0.162196908 0.170423483 0.172907361 0.174368757 0.176006600 0.180484293 0.182761711 0.183493579 0.185662114 0.188290345 0.189310672 0.196403338 0.201803209 0.204986099 0.205293637 0.206784271 0.207153614 0.209062432 0.210687723 0.212707819 0.215549636 0.216836347 0.220428587 0.224812302 0.231515448 0.232689693 0.233598203 0.235081809 0.244472670 0.248877189 0.254508205 0.255297813 0.256706997 0.258808506 0.271369945 0.277454140 0.290035742 0.296186287 0.297602317 0.299367896 0.304142083 0.306162973 0.307533606 0.315244788 0.320565162 0.322775798 0.326355716 0.328810606 0.345628049 0.350472954 0.352451168 0.354704353 0.359136959 0.363812693 0.380660999 0.383017914 0.394459718 0.400600938 0.406306942 0.428863872 0.430121102 0.444874227 0.463767806 0.463882040 0.477852740 0.477911355 0.482606483 0.486564747 0.498023342 0.509698972 0.542212265 0.564581481 0.566758438 0.578296022 0.583298803 0.604300873 0.633977872 0.643516971 0.655653928 0.665376219 0.671491383 0.681360595 0.687926389 0.691626438 0.698646441 0.704241042 0.705285296 0.714187478 0.730387144 0.737226685 0.750679877 0.771575816 0.775837397 0.800982381 0.816590077 0.819726142 0.820459934 0.828670765 0.831009690 0.838537929 0.840652511 0.844882645 0.845604511 0.848943775 0.857867545 0.859276649 0.867339775 0.869811139 0.872128745 0.875873159 0.882691262 0.888091569 0.889369562 0.893702942 0.916069399 0.920113686 0.923916604 0.931266500 0.935144853 0.958381225 0.960418842 0.969379185 0.975849947 0.989212978 0.999617291 1.013002562 1.034031316 1.042610035 1.049228426 1.055237972 1.073955839 1.084189673 1.088658194 1.109990652 1.110585320 1.116186727 1.122411901 1.123318702 1.134104675 1.142666711 1.161188129 1.168740785 1.172602138 1.173231591 1.200403281 1.204207589 1.215447540 1.247270548 1.291729792 1.295678073 1.306007555 1.314556775 1.326277082 1.326828326 1.330137163 1.334440291 1.340934094 1.345787373 1.362064646 1.373174453 1.378778725 1.380902348 1.381327949 1.386482812 1.557447871 1.671847884 1.788393820</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">59</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92263781" y3="-0.95579939" z3="-0.67736259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61550057" y3="-1.94873094" z3="-1.52833781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09725905" y3="-0.9945411" z3="-1.39224515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78434351" y3="1.47785156" z3="-1.05056138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28949581" y3="0.30905619" z3="-0.49788461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66583366" y3="2.73687532" z3="-1.16763939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0103665" y3="2.73473877" z3="-0.84079674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3762787" y3="4.99306008" z3="-0.39475704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81385423" y3="3.8512592" z3="-0.91523226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74736924" y3="5.86908567" z3="-0.20775518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1098603" y3="1.61074204" z3="-1.70174095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12039333" y3="0.35239782" z3="0.20561703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71738018" y3="0.38266489" z3="-0.66934069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60259628" y3="0.73471577" z3="0.24551042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67534091" y3="-0.85708106" z3="-1.53478499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09015208" y3="-2.46744113" z3="-1.34249661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.94580593" y3="-5.48788233" z3="-6.30625283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.6940599" y3="-5.05221338" z3="-5.33510637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03098611" y3="-3.90881998" z3="-2.86952789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.66131356" y3="-3.67148904" z3="-5.18952203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.42496498" y3="-5.87756353" z3="-4.24051432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.10761841" y3="-5.29979482" z3="-3.01756859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33904778" y3="-3.06821434" z3="-3.96347043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.87866576" y3="-3.00518115" z3="-6.02794641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.47540489" y3="-6.96534493" z3="-4.3333928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93431182" y3="-5.93179925" z3="-2.14243451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64275218" y3="-3.35919332" z3="-1.62070871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34889803" y3="-3.84160947" z3="-0.86351679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69463566" y3="-4.8444722" z3="-1.12712082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37112168" y3="-3.53561059" z3="0.58451446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38716842" y3="-3.05019362" z3="3.34178407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66765566" y3="-4.5683745" z3="1.48256417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1010991" y3="-2.25571285" z3="1.07868759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10680097" y3="-2.01493918" z3="2.44826958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66673781" y3="-4.327904" z3="2.85551194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85781514" y3="-5.57846861" z3="1.10785833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09962214" y3="-1.41741425" z3="0.41058784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11708012" y3="-1.00466619" z3="2.80157419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86413682" y3="-5.15067689" z3="3.54791302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38106607" y3="-2.86496617" z3="4.4199108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.28995459" y3="-1.73230473" z3="-3.93399461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44383659" y3="-1.32745812" z3="-3.03449061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34614702" y3="3.70817993" z3="-1.09321026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14470607" y3="-2.9760355" z3="-1.69814007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9206133" y3="-3.15850452" z3="-0.54948146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10557535" y3="-2.28493032" z3="0.38651461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83048539" y3="-0.72644556" z3="0.6618356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75320687" y3="-0.2840898" z3="-0.89809752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52125318" y3="0.47531493" z3="1.18893843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.01017551" y3="-1.06864331" z3="2.07271987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39903752" y3="-4.37378119" z3="-0.31175634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1056051" y3="-4.61622905" z3="0.89498359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.08622849" y3="-0.02508214" z3="-1.73382745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39069957" y3="0.60057393" z3="-0.71022558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.41134174" y3="-1.11191617" z3="-1.22946419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62813447" y3="0.54658283" z3="0.5422871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16485572" y3="0.22568024" z3="2.20222157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98906159" y3="1.47561999" z3="1.2339807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.46967113" y3="-0.12120163" z3="2.41404859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.83414256" y3="-1.74794734" z3="1.7690715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.47451727" y3="-1.51731175" z3="2.92190411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04507199" y3="-4.03777881" z3="0.91796239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48708989" y3="-4.35868706" z3="1.77029677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33225551" y3="-5.69250266" z3="0.89097226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27863783" y3="-2.19959119" z3="-0.18009605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13356338" y3="-3.28991962" z3="-1.05000476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48815269" y3="-4.45117136" z3="-0.64221202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99426788" y3="-4.51735521" z3="0.6552378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1433702" y3="-3.46538118" z3="1.55413641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77816533" y3="-2.30586379" z3="1.12714311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49026961" y3="-3.21057007" z3="-2.08018228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34447514" y3="-5.28625634" z3="-1.32858415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25914723" y3="-5.70986562" z3="1.07852053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73743596" y3="-3.55424916" z3="2.56291155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87240104" y3="-1.46271003" z3="1.81309067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49958448" y3="4.03187829" z3="-0.02349681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86830401" y3="3.81124057" z3="-0.10051017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38887388" y3="3.26313843" z3="-1.26803662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58274584" y3="2.96470814" z3="-2.36369904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2150753" y3="3.18707394" z3="-2.26833232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0686444" y3="4.41538576" z3="0.90436943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52876196" y3="4.03420387" z3="0.73794345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82110588" y3="2.95952783" z3="-1.33474287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.02824747" y3="2.5483343" z3="-3.26791472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.43020871" y3="2.92954958" z3="-3.10978671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16848884" y3="-5.93068692" z3="2.2651998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76406892" y3="-6.40620116" z3="0.21108944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28390982" y3="2.6298312" z3="-2.40307342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46459478" y3="3.03444603" z3="-0.30494979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64647293" y3="0.16885838" z3="-1.99071347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96958535" y3="1.41553239" z3="-1.85405077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.83732174" y3="0.10121943" z3="-2.7654969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.32462474" y3="1.21216549" z3="-3.40805443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.35316425" y3="-0.86017353" z3="-2.85062782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.23829388" y3="1.14796305" z3="-4.00548628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48305665" y3="2.54004098" z3="-2.55925157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62843252" y3="2.44109975" z3="-3.31219158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95162492" y3="3.49229711" z3="-2.50513736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.00168434" y3="3.31871707" z3="-3.84753769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57400657" y3="3.90442694" z3="-0.23238096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75185028" y3="5.05507741" z3="-0.05146868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91566505" y3="3.95737418" z3="0.24009944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42282196" y3="5.10173846" z3="0.80732422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54695338" y3="3.07080652" z3="0.15435309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45650817" y3="5.11641594" z3="1.16429298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30964925" y3="6.22939597" z3="0.52563034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61787261" y3="6.25863042" z3="0.94060161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66976233" y3="7.10919136" z3="0.64491208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03523306" y3="7.16535096" z3="1.38727883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37148577" y3="-3.9204969" z3="-2.86202477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54449117" y3="-4.9584986" z3="-2.53780333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25306118" y3="-3.59846993" z3="-3.44846643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50440532" y3="-3.90781806" z3="-3.54118718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71228906" y3="-1.58680657" z3="-2.07985325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4540083" y3="-1.11328302" z3="-2.7492815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54571711" y3="-0.92602138" z3="-1.21449053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76463812" y3="-1.62701489" z3="-2.64238234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9226,-.9558,-.6774;6.6155,-1.9487,-1.5283;6.0973,-.9945,-1.3922;4.7843,1.4779,-1.0506;4.2895,.3091,-.4979;2.6658,2.7369,-1.1676;4.0104,2.7347,-.8408;2.3763,4.9931,-.3948;1.8139,3.8513,-.9152;1.7474,5.8691,-.2078;2.1099,1.6107,-1.7017;3.1204,.3524,.2056;1.7174,.3827,-.6693;.6026,.7347,.2455;1.6753,-.8571,-1.5348;1.0902,-2.4674,-1.3425;1.9458,-5.4879,-6.3063;1.6941,-5.0522,-5.3351;1.031,-3.9088,-2.8695;1.6613,-3.6715,-5.1895;1.425,-5.8776,-4.2405;1.1076,-5.2998,-3.0176;1.339,-3.0682,-3.9635;1.8787,-3.0052,-6.0279;1.4754,-6.9653,-4.3334;.9343,-5.9318,-2.1424;.6428,-3.3592,-1.6207;-.3489,-3.8416,-.8635;-.6946,-4.8445,-1.1271;-.3711,-3.5356,.5845;-.3872,-3.0502,3.3418;-.6677,-4.5684,1.4826;-.1011,-2.2557,1.0787;-.1068,-2.0149,2.4483;-.6667,-4.3279,2.8555;-.8578,-5.5785,1.1079;.0996,-1.4174,.4106;.1171,-1.0047,2.8016;-.8641,-5.1507,3.5479;-.3811,-2.865,4.4199;1.29,-1.7323,-3.934;1.4438,-1.3275,-3.0345;.3461,3.7082,-1.0932;-2.1447,-2.976,-1.6981;-2.9206,-3.1585,-.5495;-3.1056,-2.2849,.3865;-3.8305,-.7264,.6618;-4.7532,-.2841,-.8981;-2.5213,.4753,1.1889;-5.0102,-1.0686,2.0727;-3.399,-4.3738,-.3118;-4.1056,-4.6162,.895;-4.0862,-.0251,-1.7338;-5.3907,.6006,-.7102;-5.4113,-1.1119,-1.2295;-1.6281,.5466,.5423;-2.1649,.2257,2.2022;-2.9891,1.4756,1.234;-5.4697,-.1212,2.414;-5.8341,-1.7479,1.7691;-4.4745,-1.5173,2.9219;-5.0451,-4.0378,.918;-3.4871,-4.3587,1.7703;-4.3323,-5.6925,.891;4.2786,-2.1996,-.1801;4.1336,-3.2899,-1.05;3.4882,-4.4512,-.6422;2.9943,-4.5174,.6552;3.1434,-3.4654,1.5541;3.7782,-2.3059,1.1271;4.4903,-3.2106,-2.0802;3.3445,-5.2863,-1.3286;2.2591,-5.7099,1.0785;2.7374,-3.5542,2.5629;3.8724,-1.4627,1.8131;-.4996,4.0319,-.0235;-1.8683,3.8112,-.1005;-2.3889,3.2631,-1.268;-1.5827,2.9647,-2.3637;-.2151,3.1871,-2.2683;-.0686,4.4154,.9044;-2.5288,4.0342,.7379;-3.8211,2.9595,-1.3347;-2.0282,2.5483,-3.2679;.4302,2.9295,-3.1098;2.1685,-5.9307,2.2652;1.7641,-6.4062,.2111;-4.2839,2.6298,-2.4031;-4.4646,3.0344,-.3049;6.6465,.1689,-1.9907;5.9696,1.4155,-1.8541;7.8373,.1012,-2.7655;8.3246,1.2122,-3.4081;8.3532,-.8602,-2.8506;9.2383,1.148,-4.0055;6.4831,2.54,-2.5593;7.6284,2.4411,-3.3122;5.9516,3.4923,-2.5051;8.0017,3.3187,-3.8475;4.574,3.9044,-.2324;3.7519,5.0551,-.0515;5.9157,3.9574,.2401;6.4228,5.1017,.8073;6.547,3.0708,.1544;7.4565,5.1164,1.1643;4.3096,6.2294,.5256;5.6179,6.2586,.9406;3.6698,7.1092,.6449;6.0352,7.1654,1.3873;-2.3715,-3.9205,-2.862;-2.5445,-4.9585,-2.5378;-3.2531,-3.5985,-3.4485;-1.5044,-3.9078,-3.5412;-1.7123,-1.5868,-2.0799;-2.454,-1.1133,-2.7493;-1.5457,-.926,-1.2145;-.7646,-1.627,-2.6424;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662806442773</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009699326698 0.001100933116 0.022068653643 0.005337276165</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.043896573 -0.005814006 0.000130782 0.000198275 0.000262180 0.000331363 0.000343089 0.000410797 0.000453266 0.000550323 0.000647366 0.000772138 0.000800281 0.000925147 0.001053254 0.001099353 0.001204017 0.001240000 0.001267595 0.001362255 0.001461248 0.001516197 0.001735016 0.001806381 0.002053397 0.002159573 0.002310509 0.002681776 0.003094140 0.003240413 0.003841441 0.003964257 0.004361587 0.004567155 0.004789914 0.005337244 0.005590008 0.005649301 0.006176407 0.006757085 0.007257067 0.007441429 0.007957607 0.008448639 0.008840475 0.009202756 0.009571113 0.010039956 0.010296143 0.011037121 0.012655632 0.012825164 0.013407186 0.014330491 0.014602421 0.014845203 0.015297722 0.015540368 0.016041152 0.016390853 0.016928735 0.017769781 0.018478526 0.018876933 0.020356123 0.020673039 0.021498973 0.022209253 0.023031096 0.023373859 0.024559684 0.025895482 0.026057135 0.026617236 0.026795811 0.027410930 0.027767844 0.029814154 0.030424800 0.031684453 0.032311565 0.032740702 0.035338542 0.036416563 0.038281116 0.039408151 0.040177344 0.040983661 0.041204834 0.043233904 0.045251150 0.046151791 0.046664396 0.049669340 0.050669150 0.051365073 0.051564579 0.051803783 0.052159967 0.052282329 0.052388518 0.052578295 0.053848854 0.054741296 0.056493429 0.056843690 0.056997484 0.057294527 0.057714171 0.058531321 0.059219546 0.059739804 0.060437554 0.060621094 0.061491197 0.062208321 0.063383965 0.064558193 0.064833558 0.065747802 0.067814729 0.068116269 0.068861437 0.071526554 0.071882011 0.072664156 0.076466898 0.078183614 0.080505424 0.082250019 0.083076728 0.087213602 0.089481046 0.090826276 0.092840172 0.093319733 0.094210869 0.095260849 0.095474641 0.096454463 0.096742921 0.097307680 0.099034185 0.099442147 0.101212443 0.101737965 0.102419021 0.102731542 0.103839675 0.104026251 0.106829397 0.107205622 0.108223385 0.109489674 0.110197758 0.110378153 0.112569496 0.113731525 0.116110438 0.116504457 0.117322625 0.121075360 0.122963320 0.126192365 0.127542796 0.128565831 0.130478696 0.133003801 0.134096137 0.136088459 0.136703567 0.142106914 0.144435049 0.145237799 0.145779801 0.146697556 0.152519244 0.157291101 0.162624173 0.170423430 0.173951766 0.175166719 0.176011432 0.180484467 0.183169402 0.185173926 0.185897155 0.188351676 0.190900863 0.196971815 0.201804838 0.204988235 0.205304950 0.206784482 0.207154009 0.209063256 0.210697212 0.212714701 0.215551306 0.217208383 0.220426585 0.224813316 0.231515828 0.232691328 0.233603861 0.235084453 0.244473145 0.248880296 0.254510951 0.255301024 0.256706996 0.258809275 0.271370040 0.277465949 0.290035735 0.296186486 0.297611799 0.299368881 0.304145673 0.306166399 0.307533791 0.315251359 0.320565839 0.322775906 0.326353350 0.328818910 0.345638711 0.350473412 0.352456043 0.354706518 0.359137301 0.363814119 0.380664705 0.383949123 0.395759662 0.400733894 0.406334553 0.429121147 0.430125903 0.444889689 0.463768898 0.463882709 0.477854206 0.477912543 0.482633435 0.486694558 0.498023494 0.509723358 0.542217867 0.564589329 0.566758492 0.578361557 0.583299005 0.604301903 0.634230444 0.643523752 0.655788977 0.665385955 0.671497605 0.681360752 0.688179737 0.691626789 0.698659578 0.704241042 0.705288785 0.714189431 0.730365404 0.737227255 0.750679885 0.771575872 0.775837430 0.800992164 0.816600253 0.819740337 0.820469613 0.828674413 0.831014688 0.839512938 0.840803443 0.844901986 0.846838475 0.849092794 0.857907212 0.859581817 0.867339780 0.870633869 0.872159696 0.875887125 0.887505359 0.889089898 0.893217733 0.894513358 0.916157768 0.920996976 0.923916984 0.931346188 0.936061681 0.958382342 0.961046972 0.969381195 0.975850322 0.989214331 0.999617365 1.013005924 1.034031284 1.042610032 1.049229773 1.055238407 1.074047373 1.084189672 1.088658735 1.109990677 1.110585397 1.116196092 1.122411910 1.123318694 1.134109772 1.142679396 1.161188201 1.168741316 1.172602182 1.173232267 1.200403568 1.204212628 1.215480776 1.247277362 1.292191309 1.295678042 1.306288598 1.314576531 1.326277587 1.326832393 1.330137154 1.334447991 1.340940521 1.345787832 1.362115128 1.374143694 1.378779636 1.380908151 1.381338628 1.387011531 1.557449501 1.671849306 1.789545476</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">60</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92046221" y3="-0.95605211" z3="-0.68070131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61152992" y3="-1.94888291" z3="-1.53546614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09345365" y3="-0.99475344" z3="-1.39832702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78165216" y3="1.47767288" z3="-1.05339479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28771131" y3="0.30885627" z3="-0.5000073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66339283" y3="2.73768621" z3="-1.16474238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00865092" y3="2.73469778" z3="-0.84088261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37616746" y3="4.99271372" z3="-0.3874928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81233504" y3="3.85196986" z3="-0.90877904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.747883" y3="5.86857243" z3="-0.19771586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10580975" y3="1.61241009" z3="-1.69898489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11992301" y3="0.35248798" z3="0.20564785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71536491" y3="0.38336499" z3="-0.66679803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60221963" y3="0.73496668" z3="0.25025905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67175539" y3="-0.85574008" z3="-1.53291348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09036235" y3="-2.46819622" z3="-1.34073675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.95822885" y3="-5.49267282" z3="-6.29981133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70401571" y3="-5.05632848" z3="-5.32961462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03504808" y3="-3.91115281" z3="-2.86624105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6706221" y3="-3.67550753" z3="-5.18509935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43238954" y3="-5.88089088" z3="-4.23504359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11217833" y3="-5.30222711" z3="-3.01328298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.34526951" y3="-3.07135171" z3="-3.96027786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.88985859" y3="-3.00978239" z3="-6.02350584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48326028" y3="-6.96874724" z3="-4.32692283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93713083" y3="-5.93357818" z3="-2.13801516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64494845" y3="-3.36107314" z3="-1.61835011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34931933" y3="-3.84155223" z3="-0.86295898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69264932" y3="-4.84608102" z3="-1.12521728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37109397" y3="-3.53649771" z3="0.5855324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38763498" y3="-3.04965073" z3="3.34247814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66645082" y3="-4.56915145" z3="1.48400493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10244478" y3="-2.25617562" z3="1.07913116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10817715" y3="-2.01468188" z3="2.44858781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66582902" y3="-4.32790095" z3="2.85683528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85585736" y3="-5.57964698" z3="1.10992344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09700636" y3="-1.41770259" z3="0.41058095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11463242" y3="-1.00393182" z3="2.80129785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86226091" y3="-5.15059764" z3="3.54963479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38131904" y3="-2.86397822" z3="4.42057669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2958454" y3="-1.7353733" z3="-3.932181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44612244" y3="-1.32932445" z3="-3.03268434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34428904" y3="3.71026562" z3="-1.0850638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14057535" y3="-2.98124284" z3="-1.69795343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91717054" y3="-3.1605604" z3="-0.54793289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1012352" y3="-2.28923914" z3="0.38828928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8336074" y3="-0.72218997" z3="0.64836736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74909175" y3="-0.27816354" z3="-0.91502916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5218765" y3="0.47539719" z3="1.18722917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.02364681" y3="-1.06195103" z3="2.05065122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39704926" y3="-4.37170972" z3="-0.31060253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10498387" y3="-4.61367089" z3="0.89558563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.07492521" y3="-0.01752267" z3="-1.74716907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38147522" y3="0.60640755" z3="-0.72559619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.40275576" y3="-1.10239613" z3="-1.23669544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62794789" y3="0.54697834" z3="0.54084579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16752909" y3="0.21693957" z3="2.20047064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98871854" y3="1.47875075" z3="1.23341946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.47813151" y3="-0.12115163" z3="2.39964348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.83664361" y3="-1.74290369" z3="1.75755897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.49456095" y3="-1.51249971" z3="2.91365644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0388628" y3="-4.03081867" z3="0.92198079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48963772" y3="-4.36572818" z3="1.77083947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.337841" y3="-5.68380758" z3="0.88544932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27787886" y3="-2.19977825" z3="-0.18143983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13383369" y3="-3.29172606" z3="-1.04951758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48970188" y3="-4.45301791" z3="-0.63973473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99578181" y3="-4.5175489" z3="0.65775776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14400463" y3="-3.4639667" z3="1.55496085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77779775" y3="-2.30457135" z3="1.12611681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49028877" y3="-3.21380227" z3="-2.07989418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34691908" y3="-5.2893563" z3="-1.32472795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26143466" y3="-5.70991344" z3="1.08285097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73821588" y3="-3.55153021" z3="2.56390839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87145249" y3="-1.46035644" z3="1.81084249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4998647" y3="4.03176829" z3="-0.01354527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86900084" y3="3.81330308" z3="-0.08991875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39141973" y3="3.26952765" z3="-1.25841685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58681615" y3="2.97319443" z3="-2.35573309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21871523" y3="3.19310964" z3="-2.26105676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06697362" y3="4.41078991" z3="0.91580779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52800251" y3="4.03384866" z3="0.75062333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82353783" y3="2.9679485" z3="-1.32338523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.03377249" y3="2.56009322" z3="-3.26051837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.42570247" y3="2.9363493" z3="-3.10324786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17108717" y3="-5.92910851" z3="2.26984735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76656619" y3="-6.40770154" z3="0.21648388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2905255" y3="2.64909612" z3="-2.39691313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46575831" y3="3.03842472" z3="-0.29282256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6412287" y3="0.16857854" z3="-1.99825838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96495562" y3="1.41536206" z3="-1.85965392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82997188" y3="0.10087106" z3="-2.77627416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31572117" y3="1.21185415" z3="-3.41995943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34538986" y3="-0.86060473" z3="-2.86304644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22768778" y3="1.14756062" z3="-4.01997982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47686318" y3="2.54000082" z3="-2.56575723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62015293" y3="2.44097247" z3="-3.32184502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9457937" y3="3.4923679" z3="-2.50982568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.99218797" y3="3.31863191" z3="-3.85797052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57404817" y3="3.90331591" z3="-0.23201911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75253562" y3="5.05382032" z3="-0.0471619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91686556" y3="3.95522149" z3="0.23733583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42554676" y3="5.0984947" z3="0.80542143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54784731" y3="3.06873182" z3="0.14859556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46008856" y3="5.11236426" z3="1.15996159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31188468" y3="6.22700009" z3="0.53077918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62108857" y3="6.2552666" z3="0.94274229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67241849" y3="7.10668997" z3="0.6531935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03963451" y3="7.16109894" z3="1.39013468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36849038" y3="-3.92713428" z3="-2.86057294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54361132" y3="-4.96378637" z3="-2.53594035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2481945" y3="-3.60502521" z3="-3.44906416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50067273" y3="-3.91698834" z3="-3.53910999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.710114" y3="-1.59109325" z3="-2.08479946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45184897" y3="-1.11873055" z3="-2.75352164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54208302" y3="-0.9288256" z3="-1.22170761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76472805" y3="-1.63182292" z3="-2.64834915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9205,-.9561,-.6807;6.6115,-1.9489,-1.5355;6.0935,-.9948,-1.3983;4.7817,1.4777,-1.0534;4.2877,.3089,-.5;2.6634,2.7377,-1.1647;4.0087,2.7347,-.8409;2.3762,4.9927,-.3875;1.8123,3.852,-.9088;1.7479,5.8686,-.1977;2.1058,1.6124,-1.699;3.1199,.3525,.2056;1.7154,.3834,-.6668;.6022,.735,.2503;1.6718,-.8557,-1.5329;1.0904,-2.4682,-1.3407;1.9582,-5.4927,-6.2998;1.704,-5.0563,-5.3296;1.035,-3.9112,-2.8662;1.6706,-3.6755,-5.1851;1.4324,-5.8809,-4.235;1.1122,-5.3022,-3.0133;1.3453,-3.0714,-3.9603;1.8899,-3.0098,-6.0235;1.4833,-6.9687,-4.3269;.9371,-5.9336,-2.138;.6449,-3.3611,-1.6184;-.3493,-3.8416,-.863;-.6926,-4.8461,-1.1252;-.3711,-3.5365,.5855;-.3876,-3.0497,3.3425;-.6665,-4.5692,1.484;-.1024,-2.2562,1.0791;-.1082,-2.0147,2.4486;-.6658,-4.3279,2.8568;-.8559,-5.5796,1.1099;.097,-1.4177,.4106;.1146,-1.0039,2.8013;-.8623,-5.1506,3.5496;-.3813,-2.864,4.4206;1.2958,-1.7354,-3.9322;1.4461,-1.3293,-3.0327;.3443,3.7103,-1.0851;-2.1406,-2.9812,-1.698;-2.9172,-3.1606,-.5479;-3.1012,-2.2892,.3883;-3.8336,-.7222,.6484;-4.7491,-.2782,-.915;-2.5219,.4754,1.1872;-5.0236,-1.062,2.0507;-3.397,-4.3717,-.3106;-4.105,-4.6137,.8956;-4.0749,-.0175,-1.7472;-5.3815,.6064,-.7256;-5.4028,-1.1024,-1.2367;-1.6279,.547,.5408;-2.1675,.2169,2.2005;-2.9887,1.4788,1.2334;-5.4781,-.1212,2.3996;-5.8366,-1.7429,1.7576;-4.4946,-1.5125,2.9137;-5.0389,-4.0308,.922;-3.4896,-4.3657,1.7708;-4.3378,-5.6838,.8854;4.2779,-2.1998,-.1814;4.1338,-3.2917,-1.0495;3.4897,-4.453,-.6397;2.9958,-4.5175,.6578;3.144,-3.464,1.555;3.7778,-2.3046,1.1261;4.4903,-3.2138,-2.0799;3.3469,-5.2894,-1.3247;2.2614,-5.7099,1.0829;2.7382,-3.5515,2.5639;3.8715,-1.4604,1.8108;-.4999,4.0318,-.0135;-1.869,3.8133,-.0899;-2.3914,3.2695,-1.2584;-1.5868,2.9732,-2.3557;-.2187,3.1931,-2.2611;-.067,4.4108,.9158;-2.528,4.0338,.7506;-3.8235,2.9679,-1.3234;-2.0338,2.5601,-3.2605;.4257,2.9363,-3.1032;2.1711,-5.9291,2.2698;1.7666,-6.4077,.2165;-4.2905,2.6491,-2.3969;-4.4658,3.0384,-.2928;6.6412,.1686,-1.9983;5.965,1.4154,-1.8597;7.83,.1009,-2.7763;8.3157,1.2119,-3.42;8.3454,-.8606,-2.863;9.2277,1.1476,-4.02;6.4769,2.54,-2.5658;7.6202,2.441,-3.3218;5.9458,3.4924,-2.5098;7.9922,3.3186,-3.858;4.574,3.9033,-.232;3.7525,5.0538,-.0472;5.9169,3.9552,.2373;6.4255,5.0985,.8054;6.5478,3.0687,.1486;7.4601,5.1124,1.16;4.3119,6.227,.5308;5.6211,6.2553,.9427;3.6724,7.1067,.6532;6.0396,7.1611,1.3901;-2.3685,-3.9271,-2.8606;-2.5436,-4.9638,-2.5359;-3.2482,-3.605,-3.4491;-1.5007,-3.917,-3.5391;-1.7101,-1.5911,-2.0848;-2.4518,-1.1187,-2.7535;-1.5421,-.9288,-1.2217;-.7647,-1.6318,-2.6483;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662822440008</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010949206349 0.000987336079 0.035210181529 0.005337576805</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044018305 -0.005259772 0.000131188 0.000200167 0.000262334 0.000332282 0.000351173 0.000416221 0.000471513 0.000564978 0.000649023 0.000775216 0.000800668 0.000961855 0.001060275 0.001101522 0.001214793 0.001240410 0.001270455 0.001367564 0.001463019 0.001527743 0.001734080 0.001808999 0.002067711 0.002179719 0.002360161 0.002709629 0.003096973 0.003269135 0.003949753 0.004068120 0.004389466 0.004578510 0.004824344 0.005482311 0.005590627 0.005651072 0.006178902 0.006758054 0.007323514 0.007450092 0.007980639 0.008446717 0.008856774 0.009233970 0.009663613 0.010044234 0.010298230 0.011085724 0.012718224 0.012829321 0.013432252 0.014334111 0.014615132 0.014848115 0.015298590 0.015547272 0.016042588 0.016390927 0.016956895 0.017771787 0.018492899 0.018877010 0.020359236 0.020720122 0.021498022 0.022209458 0.023031860 0.023374062 0.024559781 0.025934068 0.026165141 0.026650254 0.026923916 0.027425094 0.027768786 0.029815532 0.030424824 0.031687647 0.032313681 0.032740992 0.035338515 0.036417263 0.038282414 0.039414916 0.040177319 0.040983701 0.041207514 0.043329432 0.045253387 0.046151770 0.046924620 0.049669337 0.050669363 0.051371552 0.051568665 0.051804257 0.052281572 0.052388187 0.052483985 0.052649661 0.053851519 0.054742335 0.056493454 0.056843715 0.056997451 0.057294759 0.057714478 0.058531450 0.059219469 0.059910934 0.060437720 0.060622266 0.061491147 0.062252098 0.063677448 0.064559028 0.064869702 0.065785300 0.067843320 0.068135026 0.068866377 0.071575309 0.071891739 0.072664223 0.076467813 0.078185623 0.080513750 0.082252156 0.083539507 0.087214108 0.089481191 0.090829125 0.092840315 0.093320025 0.094210774 0.095260851 0.095475287 0.096454499 0.096762764 0.097310831 0.099153616 0.099441869 0.101216671 0.102408139 0.102548018 0.102803281 0.103844098 0.104550519 0.106829705 0.107366795 0.108224508 0.109550600 0.110232773 0.110384973 0.112569464 0.113737184 0.116113055 0.116504393 0.117322321 0.121146198 0.122963091 0.126192039 0.127545713 0.128568599 0.130532615 0.133011200 0.134095315 0.136085036 0.136706589 0.142107042 0.144448792 0.145409915 0.145811580 0.146696248 0.152518495 0.157291115 0.162932007 0.170423345 0.174069361 0.175992254 0.176316796 0.180484413 0.183185154 0.185420891 0.186392625 0.188357935 0.192533647 0.197898215 0.201811457 0.204990963 0.205326428 0.206784490 0.207154391 0.209063631 0.210702481 0.212720235 0.215551272 0.217975117 0.220451992 0.224815109 0.231516929 0.232694816 0.233607746 0.235086236 0.244473650 0.248951866 0.254511321 0.255315106 0.256707224 0.258809570 0.271370791 0.277472908 0.290035731 0.296187452 0.297783381 0.299369335 0.304146185 0.306167594 0.307536715 0.315780865 0.320566662 0.322775980 0.326523451 0.328832692 0.345645957 0.350479290 0.352466587 0.354706786 0.359144710 0.363814232 0.380664273 0.384400550 0.397576503 0.401568840 0.406412397 0.429774521 0.430156570 0.444919851 0.463771334 0.463883622 0.477854380 0.477912469 0.482635901 0.487399432 0.498023906 0.509727969 0.542217765 0.564589816 0.566758547 0.578367497 0.583300499 0.604302036 0.634275601 0.643526580 0.656636854 0.665389018 0.671497475 0.681360899 0.688628754 0.691626901 0.698923051 0.704241110 0.705288732 0.714189647 0.730514892 0.737227633 0.750679893 0.771575935 0.775837495 0.801003764 0.816619896 0.819752957 0.820482386 0.829642649 0.831118878 0.839728122 0.840892080 0.844913369 0.847199027 0.849185926 0.857911116 0.859656703 0.867339782 0.871048524 0.872208096 0.875889590 0.888191253 0.889183638 0.893635491 0.902515476 0.916281319 0.921197335 0.923917177 0.931369448 0.936636845 0.958383950 0.961233429 0.969393763 0.975850835 0.989220636 0.999617399 1.013006023 1.034031276 1.042611011 1.049230261 1.055238846 1.074046205 1.084189766 1.088658753 1.109990731 1.110585426 1.116196011 1.122411994 1.123318925 1.134112921 1.142681314 1.161189446 1.168743569 1.172602894 1.173234371 1.200404263 1.204227486 1.215497641 1.247278154 1.292597183 1.295679786 1.306328676 1.314580924 1.326277543 1.326833886 1.330137156 1.334455258 1.340948296 1.345789483 1.362156452 1.374284955 1.378780383 1.380908629 1.381341363 1.387137408 1.557449702 1.671849295 1.790714348</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">61</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91880003" y3="-0.9562405" z3="-0.68386209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60805824" y3="-1.94901371" z3="-1.54235608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09015239" y3="-0.99494393" z3="-1.40420396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77940431" y3="1.4775445" z3="-1.05614425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28643971" y3="0.30870598" z3="-0.50197603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66136861" y3="2.73820227" z3="-1.16213009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00726157" y3="2.73464106" z3="-0.84113726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37614206" y3="4.99216839" z3="-0.38135533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81110313" y3="3.85227917" z3="-0.90308774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74838873" y3="5.86782916" z3="-0.18915383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10251547" y3="1.61347311" z3="-1.69629216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11998537" y3="0.35243721" z3="0.20582217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71381345" y3="0.38400445" z3="-0.66405584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60254349" y3="0.73540472" z3="0.25526272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66826539" y3="-0.85489582" z3="-1.53049664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09146575" y3="-2.46886836" z3="-1.33870801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97012127" y3="-5.49671787" z3="-6.29368947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71352322" y3="-5.0598092" z3="-5.32437931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03890399" y3="-3.91322739" z3="-2.86344716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67959131" y3="-3.67893524" z3="-5.18084791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43935836" y3="-5.88376813" z3="-4.22998013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11627897" y3="-5.30440163" z3="-3.00934315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35139932" y3="-3.07400121" z3="-3.95714934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90067979" y3="-3.01371566" z3="-6.01914994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49049626" y3="-6.97164803" z3="-4.32111268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93944778" y3="-5.93531856" z3="-2.1341527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64657816" y3="-3.36187043" z3="-1.61670894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34548607" y3="-3.84490463" z3="-0.86041953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6902076" y3="-4.84794505" z3="-1.1240162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37037715" y3="-3.53772852" z3="0.58704098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38892539" y3="-3.05049549" z3="3.34339302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66690124" y3="-4.56985619" z3="1.48501292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10235981" y3="-2.25751166" z3="1.08055106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10901538" y3="-2.01586313" z3="2.44984407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66715192" y3="-4.32841983" z3="2.85760707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85588391" y3="-5.58015429" z3="1.11067615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09772198" y3="-1.41965793" z3="0.41221525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11357475" y3="-1.00535646" z3="2.80263789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86420597" y3="-5.15066042" z3="3.55013395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38326178" y3="-2.86463093" z3="4.4213246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30181946" y3="-1.7381388" z3="-3.9300682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44836895" y3="-1.33102892" z3="-3.0304467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34278368" y3="3.71150283" z3="-1.07747345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14140768" y3="-2.98204883" z3="-1.69976629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91829747" y3="-3.15979882" z3="-0.55166817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1018641" y3="-2.28677924" z3="0.38388398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82888723" y3="-0.72396336" z3="0.64635284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73576106" y3="-0.27377034" z3="-0.92170352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52222994" y3="0.47423232" z3="1.18723133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03084644" y3="-1.060673" z3="2.04515588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40211092" y3="-4.36919989" z3="-0.31511182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1071302" y3="-4.61060822" z3="0.89377373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05846043" y3="-0.00392243" z3="-1.74763171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38124003" y3="0.60588701" z3="-0.734318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3881273" y3="-1.10291406" z3="-1.27190562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62984418" y3="0.55146688" z3="0.54062753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1654302" y3="0.21279024" z3="2.1989017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99061062" y3="1.47049074" z3="1.24762975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49642867" y3="-0.1099292" z3="2.37774344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.84875433" y3="-1.73938177" z3="1.73597814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.50778192" y3="-1.50720335" z3="2.90731233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04306261" y3="-4.02830503" z3="0.92084512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48483977" y3="-4.35523068" z3="1.76775798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33794634" y3="-5.6859366" z3="0.89131292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27752317" y3="-2.19985848" z3="-0.18264705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13412871" y3="-3.29323791" z3="-1.04898426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49103668" y3="-4.45440088" z3="-0.63725276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9971372" y3="-4.51727343" z3="0.66032175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14490751" y3="-3.46233275" z3="1.55593144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77796905" y3="-2.3032617" z3="1.1252694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4901946" y3="-3.21669183" z3="-2.07959596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34890689" y3="-5.29190029" z3="-1.32090933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2631952" y3="-5.70921986" z3="1.08710679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73928703" y3="-3.54855979" z3="2.56506204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87124801" y3="-1.45810783" z3="1.80881224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50000045" y3="4.03140909" z3="-0.00454762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86943992" y3="3.81468053" z3="-0.08014661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39348681" y3="3.27481692" z3="-1.24937954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59024696" y3="2.97991653" z3="-2.34815616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22172543" y3="3.1973221" z3="-2.25387158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06635237" y3="4.40861198" z3="0.92441372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52775683" y3="4.03428486" z3="0.76065868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8265234" y3="2.97631204" z3="-1.31500295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0389545" y3="2.5703845" z3="-3.2540556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.42184262" y3="2.94146773" z3="-3.09711793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1726316" y3="-5.92652003" z3="2.27432947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76872718" y3="-6.4085298" z3="0.22171659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29479848" y3="2.66509195" z3="-2.38929538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46602133" y3="3.03758205" z3="-0.28000799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63647525" y3="0.16832059" z3="-2.00558808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96076906" y3="1.41520005" z3="-1.86516513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82316073" y3="0.10051606" z3="-2.78673214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30735671" y3="1.21148743" z3="-3.43160564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33819421" y3="-0.86102383" z3="-2.87499331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21767237" y3="1.14708784" z3="-4.03411212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47109078" y3="2.53990328" z3="-2.57229295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61234003" y3="2.44075342" z3="-3.33143424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94034564" y3="3.49235839" z3="-2.51469969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98315814" y3="3.31840662" z3="-3.86840916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57420143" y3="3.90241411" z3="-0.23217792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75320672" y3="5.05266269" z3="-0.0438454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91808602" y3="3.95361548" z3="0.23410801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42811504" y3="5.09601201" z3="0.80266849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54883678" y3="3.06728259" z3="0.14275057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46345732" y3="5.10933415" z3="1.15482606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31390398" y3="6.22491705" z3="0.53456957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62402579" y3="6.25253619" z3="0.94358455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67476391" y3="7.10440054" z3="0.65977311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04360923" y3="7.15764232" z3="1.39140439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36634422" y3="-3.93084438" z3="-2.86033178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54282252" y3="-4.96693119" z3="-2.53293219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24485327" y3="-3.60942568" z3="-3.4511056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49700893" y3="-3.92305153" z3="-3.53670326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70821992" y3="-1.59441658" z3="-2.08762957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44941979" y3="-1.12315879" z3="-2.75944941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54077626" y3="-0.92985917" z3="-1.22535987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76160728" y3="-1.63712618" z3="-2.65038717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9188,-.9562,-.6839;6.6081,-1.949,-1.5424;6.0902,-.9949,-1.4042;4.7794,1.4775,-1.0561;4.2864,.3087,-.502;2.6614,2.7382,-1.1621;4.0073,2.7346,-.8411;2.3761,4.9922,-.3814;1.8111,3.8523,-.9031;1.7484,5.8678,-.1892;2.1025,1.6135,-1.6963;3.12,.3524,.2058;1.7138,.384,-.6641;.6025,.7354,.2553;1.6683,-.8549,-1.5305;1.0915,-2.4689,-1.3387;1.9701,-5.4967,-6.2937;1.7135,-5.0598,-5.3244;1.0389,-3.9132,-2.8634;1.6796,-3.6789,-5.1808;1.4394,-5.8838,-4.23;1.1163,-5.3044,-3.0093;1.3514,-3.074,-3.9571;1.9007,-3.0137,-6.0191;1.4905,-6.9716,-4.3211;.9394,-5.9353,-2.1342;.6466,-3.3619,-1.6167;-.3455,-3.8449,-.8604;-.6902,-4.8479,-1.124;-.3704,-3.5377,.587;-.3889,-3.0505,3.3434;-.6669,-4.5699,1.485;-.1024,-2.2575,1.0806;-.109,-2.0159,2.4498;-.6672,-4.3284,2.8576;-.8559,-5.5802,1.1107;.0977,-1.4197,.4122;.1136,-1.0054,2.8026;-.8642,-5.1507,3.5501;-.3833,-2.8646,4.4213;1.3018,-1.7381,-3.9301;1.4484,-1.331,-3.0304;.3428,3.7115,-1.0775;-2.1414,-2.982,-1.6998;-2.9183,-3.1598,-.5517;-3.1019,-2.2868,.3839;-3.8289,-.724,.6464;-4.7358,-.2738,-.9217;-2.5222,.4742,1.1872;-5.0308,-1.0607,2.0452;-3.4021,-4.3692,-.3151;-4.1071,-4.6106,.8938;-4.0585,-.0039,-1.7476;-5.3812,.6059,-.7343;-5.3881,-1.1029,-1.2719;-1.6298,.5515,.5406;-2.1654,.2128,2.1989;-2.9906,1.4705,1.2476;-5.4964,-.1099,2.3777;-5.8488,-1.7394,1.736;-4.5078,-1.5072,2.9073;-5.0431,-4.0283,.9208;-3.4848,-4.3552,1.7678;-4.3379,-5.6859,.8913;4.2775,-2.1999,-.1826;4.1341,-3.2932,-1.049;3.491,-4.4544,-.6373;2.9971,-4.5173,.6603;3.1449,-3.4623,1.5559;3.778,-2.3033,1.1253;4.4902,-3.2167,-2.0796;3.3489,-5.2919,-1.3209;2.2632,-5.7092,1.0871;2.7393,-3.5486,2.5651;3.8712,-1.4581,1.8088;-.5,4.0314,-.0045;-1.8694,3.8147,-.0801;-2.3935,3.2748,-1.2494;-1.5902,2.9799,-2.3482;-.2217,3.1973,-2.2539;-.0664,4.4086,.9244;-2.5278,4.0343,.7607;-3.8265,2.9763,-1.315;-2.039,2.5704,-3.2541;.4218,2.9415,-3.0971;2.1726,-5.9265,2.2743;1.7687,-6.4085,.2217;-4.2948,2.6651,-2.3893;-4.466,3.0376,-.28;6.6365,.1683,-2.0056;5.9608,1.4152,-1.8652;7.8232,.1005,-2.7867;8.3074,1.2115,-3.4316;8.3382,-.861,-2.875;9.2177,1.1471,-4.0341;6.4711,2.5399,-2.5723;7.6123,2.4408,-3.3314;5.9403,3.4924,-2.5147;7.9832,3.3184,-3.8684;4.5742,3.9024,-.2322;3.7532,5.0527,-.0438;5.9181,3.9536,.2341;6.4281,5.096,.8027;6.5488,3.0673,.1428;7.4635,5.1093,1.1548;4.3139,6.2249,.5346;5.624,6.2525,.9436;3.6748,7.1044,.6598;6.0436,7.1576,1.3914;-2.3663,-3.9308,-2.8603;-2.5428,-4.9669,-2.5329;-3.2449,-3.6094,-3.4511;-1.497,-3.9231,-3.5367;-1.7082,-1.5944,-2.0876;-2.4494,-1.1232,-2.7594;-1.5408,-.9299,-1.2254;-.7616,-1.6371,-2.6504;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662827675738</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009386112124 0.000979893995 0.023218714367 0.005338160105</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044130811 -0.005565378 0.000131373 0.000200309 0.000262322 0.000332267 0.000354981 0.000416778 0.000481146 0.000570694 0.000648607 0.000775290 0.000800610 0.000968157 0.001060170 0.001102104 0.001239382 0.001251064 0.001285881 0.001407514 0.001463220 0.001530589 0.001740034 0.001818044 0.002136596 0.002200001 0.002433721 0.002719188 0.003119502 0.003273067 0.003952613 0.004160668 0.004422739 0.004588471 0.004830174 0.005520556 0.005590746 0.005755204 0.006189919 0.006758314 0.007320318 0.007449222 0.008052494 0.008503919 0.008966554 0.009381468 0.010033632 0.010057516 0.010320280 0.011092886 0.012771857 0.012848253 0.013452546 0.014338444 0.014635995 0.014853397 0.015301843 0.015562878 0.016048008 0.016391211 0.017063729 0.017778291 0.018516558 0.018877784 0.020366443 0.020797492 0.021521240 0.022209460 0.023031884 0.023377485 0.024560949 0.025941396 0.026181717 0.026655180 0.027032361 0.027753817 0.027838928 0.029815380 0.030424776 0.031688418 0.032321725 0.032741320 0.035637284 0.036420663 0.038307882 0.039456925 0.040194499 0.040986184 0.041369254 0.043381341 0.045254795 0.046151846 0.047603239 0.049669334 0.050669350 0.051377894 0.051572309 0.051804532 0.052281757 0.052388379 0.052544411 0.052989984 0.053854310 0.054743687 0.056493491 0.056844009 0.056997483 0.057295345 0.057715224 0.058532821 0.059219408 0.060091048 0.060438609 0.060625252 0.061491114 0.062251438 0.063735609 0.064559018 0.064874065 0.065790497 0.067842029 0.068135090 0.068866145 0.071580079 0.071894504 0.072664122 0.076468140 0.078185412 0.080512734 0.082252178 0.083503352 0.087214094 0.089481188 0.090828753 0.092840511 0.093320403 0.094211847 0.095260855 0.095477304 0.096455194 0.096763915 0.097310442 0.099217670 0.099442614 0.101218189 0.102413204 0.102715658 0.102973539 0.103847252 0.105435534 0.106837510 0.107778244 0.108264954 0.109557178 0.110249106 0.110389320 0.112571196 0.113737334 0.116123142 0.116505546 0.117322139 0.121165050 0.122962563 0.126192119 0.127547491 0.128570075 0.130542205 0.133041667 0.134236632 0.136265437 0.136706339 0.142106986 0.144467658 0.145538754 0.145936094 0.146699650 0.152517875 0.157291239 0.162924014 0.170423405 0.174072983 0.176009442 0.176881535 0.180484589 0.183193803 0.185437539 0.186688902 0.188358117 0.193554911 0.198349799 0.201811830 0.204997745 0.205325538 0.206786448 0.207154362 0.209063741 0.210702256 0.212720025 0.215551967 0.219333725 0.220450461 0.224816388 0.231518629 0.232702910 0.233608285 0.235086259 0.244473875 0.249057957 0.254511482 0.255332736 0.256707903 0.258809535 0.271370964 0.277472805 0.290035745 0.296191820 0.298093336 0.299377794 0.304147195 0.306167529 0.307542116 0.316614755 0.320566786 0.322776077 0.326887258 0.328841990 0.345646095 0.350481500 0.352564171 0.354706765 0.359167984 0.363814614 0.380685097 0.384625320 0.398281342 0.404540110 0.407224492 0.429950879 0.430222212 0.444926144 0.463775179 0.463891756 0.477854554 0.477913452 0.482642387 0.487958309 0.498023962 0.509732361 0.542223027 0.564595046 0.566759413 0.578403751 0.583306281 0.604305023 0.634288197 0.643526644 0.658121282 0.665390920 0.671511971 0.681361439 0.689537287 0.691631110 0.699258917 0.704241245 0.705290883 0.714200856 0.731100825 0.737234763 0.750679893 0.771575949 0.775837587 0.801098415 0.816645040 0.819766249 0.820489910 0.830719102 0.832733504 0.839736653 0.840906423 0.845011104 0.847460655 0.849226673 0.857917403 0.859660962 0.867339877 0.871237416 0.872286460 0.875889581 0.888466661 0.889188736 0.893672356 0.908624650 0.916325442 0.921223915 0.923918320 0.931371037 0.936626748 0.958387430 0.961237750 0.969407492 0.975850984 0.989225425 0.999617389 1.013010956 1.034031255 1.042613018 1.049240197 1.055243876 1.074260628 1.084190152 1.088660206 1.109990840 1.110585424 1.116207871 1.122412176 1.123319027 1.134113361 1.142681796 1.161191996 1.168745900 1.172603558 1.173236797 1.200404622 1.204238649 1.215517633 1.247279788 1.292594519 1.295681901 1.306420822 1.314584880 1.326277497 1.326833869 1.330137241 1.334455368 1.340948227 1.345809201 1.362156926 1.374666730 1.378780388 1.380910483 1.381346232 1.387300488 1.557450955 1.671850863 1.790958824</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">62</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91679785" y3="-0.95653991" z3="-0.68713112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60409245" y3="-1.94934212" z3="-1.54956344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08644167" y3="-0.99529297" z3="-1.41031118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77697164" y3="1.47728633" z3="-1.0589507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28489389" y3="0.30847471" z3="-0.50397976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65923266" y3="2.73883017" z3="-1.15931482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00583031" y3="2.73451899" z3="-0.84131354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37626662" y3="4.99173377" z3="-0.37431568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8098748" y3="3.85282237" z3="-0.89680524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74909019" y3="5.86724482" z3="-0.17925926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09880822" y3="1.61482807" z3="-1.69344795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11981708" y3="0.35251004" z3="0.20605136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7119345" y3="0.38469572" z3="-0.66115605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6024866" y3="0.7358148" z3="0.26052839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66452904" y3="-0.85375186" z3="-1.52800022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09136678" y3="-2.4696902" z3="-1.33658923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98315929" y3="-5.50093876" z3="-6.28709414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72400842" y3="-5.063441" z3="-5.31872068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04297881" y3="-3.91530236" z3="-2.86007047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68941278" y3="-3.68248489" z3="-5.1761363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44718375" y3="-5.88672208" z3="-4.22446533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12096909" y3="-5.30656573" z3="-3.00504194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3579824" y3="-3.07678537" z3="-3.95364754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9124468" y3="-3.01777658" z3="-6.01434143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49876687" y3="-6.9746747" z3="-4.3147024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94226356" y3="-5.93695134" z3="-2.12982843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64815281" y3="-3.36362399" z3="-1.6143452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34656497" y3="-3.8449975" z3="-0.86063631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68880613" y3="-4.84975991" z3="-1.1230418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3725554" y3="-3.53806399" z3="0.58730448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38978962" y3="-3.05075566" z3="3.34435771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66752566" y3="-4.57082077" z3="1.48624543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10468702" y3="-2.25758632" z3="1.08067076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11085522" y3="-2.01583652" z3="2.45007531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66741661" y3="-4.32924994" z3="2.85902575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85576595" y3="-5.58164296" z3="1.11240325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09518752" y3="-1.41962934" z3="0.41191069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11165479" y3="-1.00503978" z3="2.80251454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86362496" y3="-5.15177994" z3="3.55215706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38404023" y3="-2.86470901" z3="4.4223553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30825865" y3="-1.74086472" z3="-3.92776478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45094908" y3="-1.3327419" z3="-3.02800454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34121364" y3="3.71319597" z3="-1.06924844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13900345" y3="-2.98574433" z3="-1.70376513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91874538" y3="-3.16039467" z3="-0.55611528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10730443" y3="-2.27945506" z3="0.3722582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83589026" y3="-0.71736391" z3="0.63387754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73350556" y3="-0.2669322" z3="-0.93754082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52291942" y3="0.47243207" z3="1.19189208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04029025" y3="-1.05527645" z3="2.02193717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39643414" y3="-4.37451811" z3="-0.31019877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10451813" y3="-4.60870081" z3="0.89732231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05361255" y3="0.00175362" z3="-1.75992893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37203784" y3="0.61205934" z3="-0.74703396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37787928" y3="-1.09206343" z3="-1.27091077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62807506" y3="0.55425612" z3="0.54628874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1671753" y3="0.20127066" z3="2.20059614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9922197" y3="1.47554435" z3="1.25049737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49682857" y3="-0.11219436" z3="2.36193143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85406856" y3="-1.73324452" z3="1.71809503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52324222" y3="-1.50546901" z3="2.88992317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04347524" y3="-4.02965375" z3="0.91545079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48745863" y3="-4.34619196" z3="1.77166978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33145209" y3="-5.68446463" z3="0.89932727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27687487" y3="-2.20000794" z3="-0.18387602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13441643" y3="-3.29505061" z3="-1.04832262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49240356" y3="-4.45610828" z3="-0.63455858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99831518" y3="-4.5170853" z3="0.6630113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1454083" y3="-3.46055861" z3="1.5569036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77768983" y3="-2.30178247" z3="1.12435767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.490255" y3="-3.22006038" z3="-2.07913783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35117869" y3="-5.29496564" z3="-1.31677268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26483133" y3="-5.7086683" z3="1.09168911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73991929" y3="-3.54540282" z3="2.56620036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8704411" y3="-1.4555211" z3="1.80659514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49996411" y3="4.03112719" z3="0.00572963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86971001" y3="3.81598799" z3="-0.06892502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3958412" y3="3.28020462" z3="-1.23956414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59407394" y3="2.98711194" z3="-2.33989537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22520885" y3="3.20260418" z3="-2.24649891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0645195" y3="4.4053049" z3="0.93554149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52686618" y3="4.03421722" z3="0.77348861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8293541" y3="2.98426198" z3="-1.30473468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04388153" y3="2.58038721" z3="-3.24620311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41730216" y3="2.94801581" z3="-3.09103562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17451596" y3="-5.92422084" z3="2.2793459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77062267" y3="-6.40950311" z3="0.22739829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29780682" y3="2.67372497" z3="-2.37567375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46954064" y3="3.04808974" z3="-0.27428675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63134764" y3="0.16786642" z3="-2.01318539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95631602" y3="1.41488486" z3="-1.87082272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81589096" y3="0.09992689" z3="-2.79757737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29854881" y3="1.21090134" z3="-3.4436108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33046222" y3="-0.86171974" z3="-2.88744122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20715215" y3="1.14636652" z3="-4.04869031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46505229" y3="2.53967421" z3="-2.57894032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60418257" y3="2.44037465" z3="-3.34124077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93469382" y3="3.49225795" z3="-2.51957331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9737869" y3="3.31803787" z3="-3.87904016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57450872" y3="3.90131874" z3="-0.23207265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75411975" y3="5.05141056" z3="-0.03983019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91958408" y3="3.95159631" z3="0.2309452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43115356" y3="5.09301519" z3="0.80015797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55004435" y3="3.06532647" z3="0.13662605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4674026" y3="5.10563568" z3="1.14972991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31634426" y3="6.22262419" z3="0.53927477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62749685" y3="6.24940006" z3="0.94511349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67757061" y3="7.1019674" z3="0.66760297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04827417" y3="7.15369838" z3="1.39349865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36335339" y3="-3.93684007" z3="-2.86245455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5408087" y3="-4.97198614" z3="-2.53184335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24121096" y3="-3.61654148" z3="-3.45524835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49305873" y3="-3.93092153" z3="-3.53767889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70646075" y3="-1.59804989" z3="-2.09280336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44660439" y3="-1.12714263" z3="-2.76364921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54020166" y3="-0.9337801" z3="-1.23059497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75823268" y3="-1.64098055" z3="-2.6534118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9168,-.9565,-.6871;6.6041,-1.9493,-1.5496;6.0864,-.9953,-1.4103;4.777,1.4773,-1.059;4.2849,.3085,-.504;2.6592,2.7388,-1.1593;4.0058,2.7345,-.8413;2.3763,4.9917,-.3743;1.8099,3.8528,-.8968;1.7491,5.8672,-.1793;2.0988,1.6148,-1.6934;3.1198,.3525,.2061;1.7119,.3847,-.6612;.6025,.7358,.2605;1.6645,-.8538,-1.528;1.0914,-2.4697,-1.3366;1.9832,-5.5009,-6.2871;1.724,-5.0634,-5.3187;1.043,-3.9153,-2.8601;1.6894,-3.6825,-5.1761;1.4472,-5.8867,-4.2245;1.121,-5.3066,-3.005;1.358,-3.0768,-3.9536;1.9124,-3.0178,-6.0143;1.4988,-6.9747,-4.3147;.9423,-5.937,-2.1298;.6482,-3.3636,-1.6143;-.3466,-3.845,-.8606;-.6888,-4.8498,-1.123;-.3726,-3.5381,.5873;-.3898,-3.0508,3.3444;-.6675,-4.5708,1.4862;-.1047,-2.2576,1.0807;-.1109,-2.0158,2.4501;-.6674,-4.3292,2.859;-.8558,-5.5816,1.1124;.0952,-1.4196,.4119;.1117,-1.005,2.8025;-.8636,-5.1518,3.5522;-.384,-2.8647,4.4224;1.3083,-1.7409,-3.9278;1.4509,-1.3327,-3.028;.3412,3.7132,-1.0692;-2.139,-2.9857,-1.7038;-2.9187,-3.1604,-.5561;-3.1073,-2.2795,.3723;-3.8359,-.7174,.6339;-4.7335,-.2669,-.9375;-2.5229,.4724,1.1919;-5.0403,-1.0553,2.0219;-3.3964,-4.3745,-.3102;-4.1045,-4.6087,.8973;-4.0536,.0018,-1.7599;-5.372,.6121,-.747;-5.3779,-1.0921,-1.2709;-1.6281,.5543,.5463;-2.1672,.2013,2.2006;-2.9922,1.4755,1.2505;-5.4968,-.1122,2.3619;-5.8541,-1.7332,1.7181;-4.5232,-1.5055,2.8899;-5.0435,-4.0297,.9155;-3.4875,-4.3462,1.7717;-4.3315,-5.6845,.8993;4.2769,-2.2,-.1839;4.1344,-3.2951,-1.0483;3.4924,-4.4561,-.6346;2.9983,-4.5171,.663;3.1454,-3.4606,1.5569;3.7777,-2.3018,1.1244;4.4903,-3.2201,-2.0791;3.3512,-5.295,-1.3168;2.2648,-5.7087,1.0917;2.7399,-3.5454,2.5662;3.8704,-1.4555,1.8066;-.5,4.0311,.0057;-1.8697,3.816,-.0689;-2.3958,3.2802,-1.2396;-1.5941,2.9871,-2.3399;-.2252,3.2026,-2.2465;-.0645,4.4053,.9355;-2.5269,4.0342,.7735;-3.8294,2.9843,-1.3047;-2.0439,2.5804,-3.2462;.4173,2.948,-3.091;2.1745,-5.9242,2.2793;1.7706,-6.4095,.2274;-4.2978,2.6737,-2.3757;-4.4695,3.0481,-.2743;6.6313,.1679,-2.0132;5.9563,1.4149,-1.8708;7.8159,.0999,-2.7976;8.2985,1.2109,-3.4436;8.3305,-.8617,-2.8874;9.2072,1.1464,-4.0487;6.4651,2.5397,-2.5789;7.6042,2.4404,-3.3412;5.9347,3.4923,-2.5196;7.9738,3.318,-3.879;4.5745,3.9013,-.2321;3.7541,5.0514,-.0398;5.9196,3.9516,.2309;6.4312,5.093,.8002;6.55,3.0653,.1366;7.4674,5.1056,1.1497;4.3163,6.2226,.5393;5.6275,6.2494,.9451;3.6776,7.102,.6676;6.0483,7.1537,1.3935;-2.3634,-3.9368,-2.8625;-2.5408,-4.972,-2.5318;-3.2412,-3.6165,-3.4552;-1.4931,-3.9309,-3.5377;-1.7065,-1.598,-2.0928;-2.4466,-1.1271,-2.7636;-1.5402,-.9338,-1.2306;-.7582,-1.641,-2.6534;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662813577334</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008166284080 0.001127234700 0.027918736902 0.005337724590</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044172739 -0.006499748 0.000131021 0.000200963 0.000263219 0.000332841 0.000354930 0.000416816 0.000481288 0.000572616 0.000648735 0.000775345 0.000801219 0.000972160 0.001064964 0.001106350 0.001240356 0.001256681 0.001286954 0.001414802 0.001464545 0.001534074 0.001744989 0.001831149 0.002153997 0.002359665 0.002485328 0.002748383 0.003155501 0.003273053 0.003953117 0.004160095 0.004420940 0.004602961 0.004838109 0.005520396 0.005590928 0.005867955 0.006209392 0.006758811 0.007355241 0.007471079 0.008063119 0.008598180 0.009041100 0.009508061 0.010034649 0.010158758 0.010452272 0.011109547 0.012766954 0.012845542 0.013451835 0.014337860 0.014634751 0.014856447 0.015302885 0.015561560 0.016052211 0.016391531 0.017089975 0.017779782 0.018519231 0.018880276 0.020369374 0.020838729 0.021618396 0.022209466 0.023035499 0.023384678 0.024567831 0.025941512 0.026187537 0.026656494 0.027027516 0.027768477 0.028725462 0.029815460 0.030424746 0.031706254 0.032320367 0.032743998 0.036408236 0.037120124 0.038441101 0.039585790 0.040226913 0.041009859 0.041490967 0.043389682 0.045255705 0.046152196 0.048668680 0.049669361 0.050670436 0.051387499 0.051577552 0.051804612 0.052281826 0.052388417 0.052555752 0.053651489 0.053879010 0.054745931 0.056493477 0.056844434 0.056997835 0.057301346 0.057717748 0.058536288 0.059219496 0.060435848 0.060512117 0.060648859 0.061491757 0.062255132 0.063737867 0.064559728 0.064874073 0.065791610 0.067849345 0.068137334 0.068866365 0.071581340 0.071894347 0.072664039 0.076468092 0.078191726 0.080533222 0.082252986 0.083871816 0.087216173 0.089481210 0.090831090 0.092840644 0.093324022 0.094214527 0.095260957 0.095485093 0.096457012 0.096808020 0.097311449 0.099248402 0.099442391 0.101219447 0.102413310 0.102749592 0.103095593 0.103855605 0.105771601 0.106873335 0.108125885 0.108693147 0.109557429 0.110258667 0.110413575 0.112574060 0.113753898 0.116121661 0.116505386 0.117321987 0.121170122 0.122964107 0.126194719 0.127554121 0.128572146 0.130563051 0.133045332 0.134392376 0.136660629 0.136876910 0.142107375 0.144483442 0.145578762 0.146073676 0.146705192 0.152516950 0.157291665 0.163176714 0.170424494 0.174078164 0.176025844 0.177200009 0.180485216 0.183202317 0.185453150 0.186918263 0.188358085 0.194239935 0.198359013 0.201813220 0.205002345 0.205340092 0.206789242 0.207155230 0.209064660 0.210710461 0.212724471 0.215557187 0.220264144 0.220648579 0.224816318 0.231518784 0.232706795 0.233608796 0.235086964 0.244474098 0.249076161 0.254513102 0.255335461 0.256708106 0.258809620 0.271370952 0.277476246 0.290035826 0.296196694 0.298237928 0.299396329 0.304155171 0.306168530 0.307544454 0.316849208 0.320567343 0.322777368 0.327039266 0.328841361 0.345673641 0.350517828 0.353239025 0.354707984 0.359179202 0.363817293 0.380802352 0.384781646 0.398267574 0.405595564 0.410868172 0.429978825 0.430232861 0.444935081 0.463775341 0.463903142 0.477859888 0.477920052 0.482704220 0.487943162 0.498024081 0.509796927 0.542247447 0.564633507 0.566761083 0.578668381 0.583313339 0.604312436 0.634296442 0.643535411 0.659882249 0.665404950 0.671576906 0.681366962 0.690724899 0.691655040 0.699355272 0.704241360 0.705295604 0.714238069 0.731434772 0.737249437 0.750679914 0.771575974 0.775837837 0.801200418 0.816668894 0.819778854 0.820489886 0.830773661 0.834503990 0.839764714 0.840906151 0.845562770 0.847997749 0.849275991 0.857968368 0.859828091 0.867340677 0.871274580 0.872368799 0.875889813 0.888467377 0.889228762 0.893696053 0.913109282 0.916327542 0.921476229 0.923919571 0.931399820 0.937092963 0.958391123 0.961409980 0.969413392 0.975851952 0.989228110 0.999617399 1.013023121 1.034031294 1.042616144 1.049248256 1.055249904 1.074659527 1.084190350 1.088662281 1.109990854 1.110585497 1.116225776 1.122412292 1.123319032 1.134113358 1.142681723 1.161191955 1.168746153 1.172604128 1.173236884 1.200404680 1.204239078 1.215684181 1.247287138 1.292944759 1.295683939 1.307194842 1.314635200 1.326277735 1.326837090 1.330137221 1.334462798 1.340949951 1.345813688 1.362177887 1.377071922 1.378787459 1.380928030 1.381380840 1.389028898 1.557460391 1.671852003 1.791080431</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">63</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9150389" y3="-0.95678395" z3="-0.69010985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60043421" y3="-1.94966912" z3="-1.55621028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08302761" y3="-0.99563808" z3="-1.41598952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77474641" y3="1.47709708" z3="-1.06173057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28362938" y3="0.30833018" z3="-0.50586632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65721971" y3="2.73934654" z3="-1.15682854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00448177" y3="2.73444801" z3="-0.84172157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37635215" y3="4.99125565" z3="-0.36827782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80870323" y3="3.85320843" z3="-0.89129554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74972696" y3="5.86656611" z3="-0.17071902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09538169" y3="1.61587317" z3="-1.69069405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11992931" y3="0.35263725" z3="0.20634446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71047121" y3="0.38524699" z3="-0.65820926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60292804" y3="0.73607563" z3="0.26578285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66115742" y3="-0.85292985" z3="-1.52540506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09172227" y3="-2.47035677" z3="-1.33431528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99605676" y3="-5.50487596" z3="-6.28043555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73426943" y3="-5.06682922" z3="-5.31301679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04683054" y3="-3.91729321" z3="-2.85687345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69906573" y3="-3.68580592" z3="-5.1713781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45470612" y3="-5.88951491" z3="-4.21898106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12526893" y3="-5.30865528" z3="-3.00078381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36442956" y3="-3.07932739" z3="-3.95010911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92421842" y3="-3.02158731" z3="-6.00939582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50677107" y3="-6.97751489" z3="-4.30838187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94470864" y3="-5.93853497" z3="-2.12558067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64971731" y3="-3.36484051" z3="-1.61223209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34478468" y3="-3.84714978" z3="-0.85865576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6876726" y3="-4.85108552" z3="-1.1220127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37242421" y3="-3.53962016" z3="0.58878122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39069208" y3="-3.05089249" z3="3.34503321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66732767" y3="-4.57209227" z3="1.48754741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1065433" y3="-2.25802687" z3="1.08129749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11278544" y3="-2.0157345" z3="2.45059981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6673927" y3="-4.32994931" z3="2.86021691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85530424" y3="-5.58300661" z3="1.11394587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09184495" y3="-1.41971136" z3="0.41190583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10880721" y3="-1.00425277" z3="2.80245381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86292399" y3="-5.1524563" z3="3.55357647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38456692" y3="-2.86466503" z3="4.423033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31470838" y3="-1.74345437" z3="-3.92527283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45384385" y3="-1.33429276" z3="-3.02542851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33972628" y3="3.7146372" z3="-1.06192762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13808883" y3="-2.98779493" z3="-1.70392514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91642923" y3="-3.16053439" z3="-0.55461938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10371553" y3="-2.28406856" z3="0.37597712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83147914" y3="-0.7151584" z3="0.63040055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72432018" y3="-0.26086358" z3="-0.94193945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52470321" y3="0.47324449" z3="1.18599399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04688032" y3="-1.0535347" z3="2.01337107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39666571" y3="-4.370019" z3="-0.31126895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10472692" y3="-4.60573634" z3="0.89628413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03930924" y3="0.01159274" z3="-1.76073821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37261076" y3="0.61819523" z3="-0.75963742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3703478" y3="-1.08925682" z3="-1.29569188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63471478" y3="0.55899927" z3="0.5390067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16744261" y3="0.19375709" z3="2.19330732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9906964" y3="1.47068857" z3="1.26049997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5075977" y3="-0.10603973" z3="2.34811922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86506979" y3="-1.72792854" z3="1.69168438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.53625228" y3="-1.50784517" z3="2.87888183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0403353" y3="-4.02481171" z3="0.91754521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49030415" y3="-4.35023018" z3="1.77067481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33518848" y3="-5.67704996" z3="0.89402891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27631633" y3="-2.20004772" z3="-0.18482404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1346396" y3="-3.29667751" z3="-1.04738973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49354544" y3="-4.45754282" z3="-0.63163099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99926716" y3="-4.51665162" z3="0.66594374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14574689" y3="-3.45855421" z3="1.55809906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77739917" y3="-2.30014492" z3="1.12369358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49034637" y3="-3.223284" z3="-2.07836982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3531182" y3="-5.29767929" z3="-1.31240819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2663704" y3="-5.7079522" z3="1.09651408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74035672" y3="-3.54196123" z3="2.56755214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86970964" y3="-1.45279937" z3="1.80462266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49979823" y3="4.03076078" z3="0.01485149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86990165" y3="3.81736313" z3="-0.05883613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3979533" y3="3.28534502" z3="-1.23025986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59784064" y3="2.99395306" z3="-2.33229319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22848905" y3="3.20716626" z3="-2.23961923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06273683" y3="4.40165381" z3="0.94544149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52562115" y3="4.03357094" z3="0.78540206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83181082" y3="2.99174024" z3="-1.29422868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04934705" y3="2.59004875" z3="-3.2391805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41289873" y3="2.9533825" z3="-3.08514502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17644927" y3="-5.9219343" z3="2.28450298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77213184" y3="-6.41008154" z3="0.23327449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30766774" y3="2.70164371" z3="-2.37676805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46665265" y3="3.03938373" z3="-0.25351094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62655733" y3="0.16739503" z3="-2.02036385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95216819" y3="1.41455581" z3="-1.87629462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80905386" y3="0.09926602" z3="-2.80781691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29025713" y3="1.21018639" z3="-3.45503988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32317747" y3="-0.86247903" z3="-2.89911438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19722506" y3="1.14547603" z3="-4.06253802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45941202" y3="2.53935233" z3="-2.58545108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59652663" y3="2.43985148" z3="-3.35070758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92943386" y3="3.492051" z3="-2.52450213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96498644" y3="3.31748104" z3="-3.88935007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5747608" y3="3.90043196" z3="-0.23241233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75492619" y3="5.0503036" z3="-0.03665065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92092084" y3="3.94999524" z3="0.2275038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43389686" y3="5.0905663" z3="0.79714829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55111713" y3="3.06386153" z3="0.13061744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47096498" y3="5.10263482" z3="1.14427502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31856252" y3="6.22060817" z3="0.54292891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63065435" y3="6.24673518" z3="0.94573345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68015863" y3="7.09977885" z3="0.67411131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05252029" y3="7.1503281" z3="1.39451632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36092601" y3="-3.94145446" z3="-2.86140489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53986961" y3="-4.97562162" z3="-2.53071194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23691746" y3="-3.62182626" z3="-3.45706615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48955444" y3="-3.93771197" z3="-3.53552834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70425432" y3="-1.60089401" z3="-2.09628125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44452109" y3="-1.13131498" z3="-2.77015837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53750667" y3="-0.93465114" z3="-1.2355538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75817166" y3="-1.64472031" z3="-2.65799566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.915,-.9568,-.6901;6.6004,-1.9497,-1.5562;6.083,-.9956,-1.416;4.7747,1.4771,-1.0617;4.2836,.3083,-.5059;2.6572,2.7393,-1.1568;4.0045,2.7344,-.8417;2.3764,4.9913,-.3683;1.8087,3.8532,-.8913;1.7497,5.8666,-.1707;2.0954,1.6159,-1.6907;3.1199,.3526,.2063;1.7105,.3852,-.6582;.6029,.7361,.2658;1.6612,-.8529,-1.5254;1.0917,-2.4704,-1.3343;1.9961,-5.5049,-6.2804;1.7343,-5.0668,-5.313;1.0468,-3.9173,-2.8569;1.6991,-3.6858,-5.1714;1.4547,-5.8895,-4.219;1.1253,-5.3087,-3.0008;1.3644,-3.0793,-3.9501;1.9242,-3.0216,-6.0094;1.5068,-6.9775,-4.3084;.9447,-5.9385,-2.1256;.6497,-3.3648,-1.6122;-.3448,-3.8471,-.8587;-.6877,-4.8511,-1.122;-.3724,-3.5396,.5888;-.3907,-3.0509,3.345;-.6673,-4.5721,1.4875;-.1065,-2.258,1.0813;-.1128,-2.0157,2.4506;-.6674,-4.3299,2.8602;-.8553,-5.583,1.1139;.0918,-1.4197,.4119;.1088,-1.0043,2.8025;-.8629,-5.1525,3.5536;-.3846,-2.8647,4.423;1.3147,-1.7435,-3.9253;1.4538,-1.3343,-3.0254;.3397,3.7146,-1.0619;-2.1381,-2.9878,-1.7039;-2.9164,-3.1605,-.5546;-3.1037,-2.2841,.376;-3.8315,-.7152,.6304;-4.7243,-.2609,-.9419;-2.5247,.4732,1.186;-5.0469,-1.0535,2.0134;-3.3967,-4.37,-.3113;-4.1047,-4.6057,.8963;-4.0393,.0116,-1.7607;-5.3726,.6182,-.7596;-5.3703,-1.0893,-1.2957;-1.6347,.559,.539;-2.1674,.1938,2.1933;-2.9907,1.4707,1.2605;-5.5076,-.106,2.3481;-5.8651,-1.7279,1.6917;-4.5363,-1.5078,2.8789;-5.0403,-4.0248,.9175;-3.4903,-4.3502,1.7707;-4.3352,-5.677,.894;4.2763,-2.2,-.1848;4.1346,-3.2967,-1.0474;3.4935,-4.4575,-.6316;2.9993,-4.5167,.6659;3.1457,-3.4586,1.5581;3.7774,-2.3001,1.1237;4.4903,-3.2233,-2.0784;3.3531,-5.2977,-1.3124;2.2664,-5.708,1.0965;2.7404,-3.542,2.5676;3.8697,-1.4528,1.8046;-.4998,4.0308,.0149;-1.8699,3.8174,-.0588;-2.398,3.2853,-1.2303;-1.5978,2.994,-2.3323;-.2285,3.2072,-2.2396;-.0627,4.4017,.9454;-2.5256,4.0336,.7854;-3.8318,2.9917,-1.2942;-2.0493,2.59,-3.2392;.4129,2.9534,-3.0851;2.1764,-5.9219,2.2845;1.7721,-6.4101,.2333;-4.3077,2.7016,-2.3768;-4.4667,3.0394,-.2535;6.6266,.1674,-2.0204;5.9522,1.4146,-1.8763;7.8091,.0993,-2.8078;8.2903,1.2102,-3.455;8.3232,-.8625,-2.8991;9.1972,1.1455,-4.0625;6.4594,2.5394,-2.5855;7.5965,2.4399,-3.3507;5.9294,3.4921,-2.5245;7.965,3.3175,-3.8894;4.5748,3.9004,-.2324;3.7549,5.0503,-.0367;5.9209,3.95,.2275;6.4339,5.0906,.7971;6.5511,3.0639,.1306;7.471,5.1026,1.1443;4.3186,6.2206,.5429;5.6307,6.2467,.9457;3.6802,7.0998,.6741;6.0525,7.1503,1.3945;-2.3609,-3.9415,-2.8614;-2.5399,-4.9756,-2.5307;-3.2369,-3.6218,-3.4571;-1.4896,-3.9377,-3.5355;-1.7043,-1.6009,-2.0963;-2.4445,-1.1313,-2.7702;-1.5375,-.9347,-1.2356;-.7582,-1.6447,-2.658;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662799519361</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.016022415898 0.001392800352 0.024845949464 0.005337470100</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044169512 -0.007972386 0.000138127 0.000202016 0.000266433 0.000332785 0.000356360 0.000417370 0.000483599 0.000577843 0.000649551 0.000777308 0.000801212 0.000975753 0.001067590 0.001106232 0.001244913 0.001256608 0.001287968 0.001430391 0.001464939 0.001541405 0.001745305 0.001830536 0.002154040 0.002386639 0.002482592 0.002747255 0.003156849 0.003273096 0.003955290 0.004174434 0.004441919 0.004617956 0.004857863 0.005520937 0.005590971 0.005871278 0.006214429 0.006761296 0.007377454 0.007524918 0.008063355 0.008669401 0.009090726 0.009558954 0.010045600 0.010245889 0.010538011 0.011111913 0.012800427 0.012876639 0.013538839 0.014345256 0.014661255 0.014857298 0.015303336 0.015577208 0.016057059 0.016392827 0.017120333 0.017785687 0.018530792 0.018886107 0.020369178 0.020838970 0.021609651 0.022210504 0.023038667 0.023390810 0.024572879 0.025941557 0.026191732 0.026659094 0.027033869 0.027770433 0.029004010 0.029816687 0.030425031 0.031739828 0.032334038 0.032748264 0.036410871 0.038162926 0.039236506 0.040193890 0.040822788 0.041401470 0.042341761 0.043479894 0.045256466 0.046152457 0.049668995 0.050016288 0.050686195 0.051412770 0.051590686 0.051804778 0.052281910 0.052388452 0.052562085 0.053845572 0.054558975 0.054772938 0.056493462 0.056845658 0.057001857 0.057326924 0.057719928 0.058538493 0.059219652 0.060438769 0.060609347 0.060942864 0.061492295 0.062268309 0.063738937 0.064562921 0.064883060 0.065795392 0.067852435 0.068158746 0.068892496 0.071621845 0.071895076 0.072664002 0.076468054 0.078219855 0.080562288 0.082256064 0.084605004 0.087228953 0.089481227 0.090836271 0.092840944 0.093334383 0.094215059 0.095261377 0.095490268 0.096460550 0.096881063 0.097311617 0.099245289 0.099442497 0.101221103 0.102422607 0.102753120 0.103191715 0.103877633 0.105749541 0.106913474 0.108201923 0.108995939 0.109560315 0.110266504 0.110527227 0.112574271 0.113824167 0.116159124 0.116514035 0.117321791 0.121256586 0.122983175 0.126234226 0.127553390 0.128600409 0.130649010 0.133048708 0.134439688 0.136664385 0.137287440 0.142112353 0.144501595 0.145594532 0.146162811 0.146703913 0.152517324 0.157296115 0.163601930 0.170431646 0.174081954 0.176052249 0.177503654 0.180495627 0.183211985 0.185505803 0.187093847 0.188372349 0.194703657 0.198370344 0.201816411 0.205002615 0.205370488 0.206791703 0.207156939 0.209065759 0.210732314 0.212742783 0.215570363 0.220329764 0.221249108 0.224817770 0.231519055 0.232706490 0.233615069 0.235090627 0.244479393 0.249076499 0.254516417 0.255336044 0.256708084 0.258810596 0.271370999 0.277491606 0.290035999 0.296202054 0.298237092 0.299417626 0.304179864 0.306171218 0.307544394 0.316837424 0.320571435 0.322781258 0.327036267 0.328854398 0.345754046 0.350562270 0.353757951 0.354718367 0.359178497 0.363824920 0.381074405 0.384774053 0.398661799 0.405708317 0.413438805 0.430084695 0.430590855 0.444970571 0.463780307 0.463912245 0.477873920 0.477956213 0.482924481 0.488176634 0.498024270 0.510034647 0.542309300 0.564760044 0.566764899 0.579606417 0.583319869 0.604329362 0.634301588 0.643583757 0.660735764 0.665429781 0.671750971 0.681375860 0.691466780 0.691921858 0.699383034 0.704241501 0.705299099 0.714343135 0.731618792 0.737281284 0.750680014 0.771576075 0.775838999 0.801204750 0.816677904 0.819808355 0.820504093 0.830832598 0.834464529 0.839771579 0.840906546 0.845790105 0.848728659 0.849627259 0.857979285 0.859868747 0.867342342 0.871302779 0.872389536 0.875890735 0.888817855 0.889399514 0.893719786 0.915847643 0.916407277 0.921572841 0.923919528 0.931415035 0.937348028 0.958391032 0.961615216 0.969419191 0.975853532 0.989229801 0.999617410 1.013025785 1.034032464 1.042617265 1.049248398 1.055250973 1.074756242 1.084190496 1.088662263 1.109990853 1.110585576 1.116226300 1.122412292 1.123319019 1.134113660 1.142691193 1.161196316 1.168746380 1.172604265 1.173237370 1.200404724 1.204242207 1.215860596 1.247291045 1.293381944 1.295689567 1.309296840 1.314841832 1.326277911 1.326849397 1.330137241 1.334469372 1.340951521 1.345820440 1.362192951 1.378756518 1.380163172 1.381002918 1.381645856 1.397757941 1.557469264 1.671852004 1.792558468</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">64</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91327319" y3="-0.95702275" z3="-0.69332881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59664243" y3="-1.94995953" z3="-1.56345157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07948963" y3="-0.99595346" z3="-1.42212585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77248194" y3="1.47690949" z3="-1.06462446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28237636" y3="0.3081926" z3="-0.50780695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65518381" y3="2.73986788" z3="-1.15412291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00314298" y3="2.73437369" z3="-0.84209944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37651103" y3="4.99081324" z3="-0.36208639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80752212" y3="3.85361101" z3="-0.88539809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75045639" y3="5.86594468" z3="-0.16199814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09194018" y3="1.61692397" z3="-1.68765859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12016061" y3="0.35281804" z3="0.2068152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70893386" y3="0.38589546" z3="-0.6549421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60315911" y3="0.73646175" z3="0.27129238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65788834" y3="-0.85201033" z3="-1.52240697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09248217" y3="-2.47074771" z3="-1.33214535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0093189" y3="-5.50826351" z3="-6.27391484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74483079" y3="-5.06973904" z3="-5.30745726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0509562" y3="-3.91897268" z3="-2.85377089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70910036" y3="-3.68866115" z3="-5.16664779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4623313" y3="-5.89188292" z3="-4.21378267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12964821" y3="-5.31040961" z3="-2.9967869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37125486" y3="-3.08154995" z3="-3.94657911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93642757" y3="-3.02486616" z3="-6.00440131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51474608" y3="-6.97991223" z3="-4.30245991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9470187" y3="-5.93991412" z3="-2.12177466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65153698" y3="-3.36570438" z3="-1.61025154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34272092" y3="-3.84877392" z3="-0.85719024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68525374" y3="-4.85285059" z3="-1.12056731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37227824" y3="-3.54027126" z3="0.58992659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39196787" y3="-3.05177927" z3="3.34594843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66756725" y3="-4.57260853" z3="1.48840286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10694184" y3="-2.25928241" z3="1.08273326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11376376" y3="-2.01705183" z3="2.45191905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66849984" y3="-4.3303865" z3="2.86086819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85472306" y3="-5.58359565" z3="1.11466746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09174277" y3="-1.42144635" z3="0.41395738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10771199" y3="-1.00609626" z3="2.80408643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86437984" y3="-5.15263515" z3="3.55378856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38616312" y3="-2.86544119" z3="4.42381681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32151918" y3="-1.74569458" z3="-3.92262039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45718097" y3="-1.33566697" z3="-3.02265124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33819631" y3="3.715882" z3="-1.05362361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13688415" y3="-2.98987771" z3="-1.7057356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91664782" y3="-3.16100713" z3="-0.55880731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10308831" y3="-2.28114984" z3="0.36991199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83456859" y3="-0.71821358" z3="0.62182006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71652857" y3="-0.2575122" z3="-0.95913214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52679" y3="0.46944091" z3="1.18966395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05869732" y3="-1.05034089" z3="1.99837051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39967307" y3="-4.36965989" z3="-0.31465752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10714682" y3="-4.60355348" z3="0.89385414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02607129" y3="0.02479454" z3="-1.77038493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3638127" y3="0.61619942" z3="-0.76858413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35771045" y3="-1.08367351" z3="-1.31888658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63489775" y3="0.55856784" z3="0.54098561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1660438" y3="0.18609111" z3="2.19196658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9954654" y3="1.46872221" z3="1.26831506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51822325" y3="-0.09769242" z3="2.32659853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87075026" y3="-1.72225578" z3="1.68766426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55418997" y3="-1.50304389" z3="2.87222818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04257171" y3="-4.02122203" z3="0.91721585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48693608" y3="-4.34465231" z3="1.76709301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33805467" y3="-5.67768798" z3="0.89571433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27585785" y3="-2.20013241" z3="-0.18598925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13494349" y3="-3.29832316" z3="-1.04667953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49482416" y3="-4.45901371" z3="-0.62889478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00046013" y3="-4.51633068" z3="0.66870625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14634391" y3="-3.45672176" z3="1.55913543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77729699" y3="-2.29865797" z3="1.1228295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49037735" y3="-3.22646598" z3="-2.07785713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3550664" y3="-5.3003555" z3="-1.30826047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26796016" y3="-5.70717879" z3="1.10101592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74094795" y3="-3.53861912" z3="2.56871186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86908884" y3="-1.45022868" z3="1.80243914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4996858" y3="4.03018633" z3="0.0248591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8702288" y3="3.81883486" z3="-0.04784136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40039199" y3="3.29093127" z3="-1.22006251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60159861" y3="3.00020744" z3="-2.32309373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23192339" y3="3.21138835" z3="-2.23155369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06150057" y3="4.39942115" z3="0.9549035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52500596" y3="4.03437646" z3="0.79681523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83544068" y3="3.00112058" z3="-1.28519273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05468664" y3="2.59941623" z3="-3.23071606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40810823" y3="2.95930325" z3="-3.07882969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17815175" y3="-5.91944206" z3="2.28923594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77378574" y3="-6.41061917" z3="0.23880495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30458357" y3="2.69703162" z3="-2.3519221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47344083" y3="3.05835382" z3="-0.25498073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62155431" y3="0.16696249" z3="-2.02804715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9478319" y3="1.41426523" z3="-1.8821051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8018894" y3="0.09866771" z3="-2.81874554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28155078" y3="1.20955347" z3="-3.46717133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31555022" y3="-0.86317869" z3="-2.91159602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18680265" y3="1.14468768" z3="-4.07721907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45346976" y3="2.53909412" z3="-2.59233766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5884675" y3="2.43941606" z3="-3.36071786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92388233" y3="3.49191633" z3="-2.52969343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95571983" y3="3.31702932" z3="-3.9002071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57508094" y3="3.89952122" z3="-0.23281023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75583598" y3="5.04919541" z3="-0.03347853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92236937" y3="3.94832608" z3="0.22386615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43682146" y3="5.08803613" z3="0.79387905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55227328" y3="3.06228166" z3="0.12431301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47474294" y3="5.09953055" z3="1.13846339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32093467" y3="6.21856641" z3="0.54652059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6340029" y3="6.24400939" z3="0.94618203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68289175" y3="7.09755289" z3="0.68062355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05700332" y3="7.14687879" z3="1.39533144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35837779" y3="-3.9450389" z3="-2.86139758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53890061" y3="-4.97856148" z3="-2.52818675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23308411" y3="-3.6253861" z3="-3.45842633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48564864" y3="-3.94332889" z3="-3.5334366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70291056" y3="-1.60405021" z3="-2.10008348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44232814" y3="-1.13584675" z3="-2.77537686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53703653" y3="-0.93488045" z3="-1.24047317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75460563" y3="-1.64985254" z3="-2.66005295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9133,-.957,-.6933;6.5966,-1.95,-1.5635;6.0795,-.996,-1.4221;4.7725,1.4769,-1.0646;4.2824,.3082,-.5078;2.6552,2.7399,-1.1541;4.0031,2.7344,-.8421;2.3765,4.9908,-.3621;1.8075,3.8536,-.8854;1.7505,5.8659,-.162;2.0919,1.6169,-1.6877;3.1202,.3528,.2068;1.7089,.3859,-.6549;.6032,.7365,.2713;1.6579,-.852,-1.5224;1.0925,-2.4707,-1.3321;2.0093,-5.5083,-6.2739;1.7448,-5.0697,-5.3075;1.051,-3.919,-2.8538;1.7091,-3.6887,-5.1666;1.4623,-5.8919,-4.2138;1.1296,-5.3104,-2.9968;1.3713,-3.0815,-3.9466;1.9364,-3.0249,-6.0044;1.5147,-6.9799,-4.3025;.947,-5.9399,-2.1218;.6515,-3.3657,-1.6103;-.3427,-3.8488,-.8572;-.6853,-4.8529,-1.1206;-.3723,-3.5403,.5899;-.392,-3.0518,3.3459;-.6676,-4.5726,1.4884;-.1069,-2.2593,1.0827;-.1138,-2.0171,2.4519;-.6685,-4.3304,2.8609;-.8547,-5.5836,1.1147;.0917,-1.4214,.414;.1077,-1.0061,2.8041;-.8644,-5.1526,3.5538;-.3862,-2.8654,4.4238;1.3215,-1.7457,-3.9226;1.4572,-1.3357,-3.0227;.3382,3.7159,-1.0536;-2.1369,-2.9899,-1.7057;-2.9166,-3.161,-.5588;-3.1031,-2.2811,.3699;-3.8346,-.7182,.6218;-4.7165,-.2575,-.9591;-2.5268,.4694,1.1897;-5.0587,-1.0503,1.9984;-3.3997,-4.3697,-.3147;-4.1071,-4.6036,.8939;-4.0261,.0248,-1.7704;-5.3638,.6162,-.7686;-5.3577,-1.0837,-1.3189;-1.6349,.5586,.541;-2.166,.1861,2.192;-2.9955,1.4687,1.2683;-5.5182,-.0977,2.3266;-5.8708,-1.7223,1.6877;-4.5542,-1.503,2.8722;-5.0426,-4.0212,.9172;-3.4869,-4.3447,1.7671;-4.3381,-5.6777,.8957;4.2759,-2.2001,-.186;4.1349,-3.2983,-1.0467;3.4948,-4.459,-.6289;3.0005,-4.5163,.6687;3.1463,-3.4567,1.5591;3.7773,-2.2987,1.1228;4.4904,-3.2265,-2.0779;3.3551,-5.3004,-1.3083;2.268,-5.7072,1.101;2.7409,-3.5386,2.5687;3.8691,-1.4502,1.8024;-.4997,4.0302,.0249;-1.8702,3.8188,-.0478;-2.4004,3.2909,-1.2201;-1.6016,3.0002,-2.3231;-.2319,3.2114,-2.2316;-.0615,4.3994,.9549;-2.525,4.0344,.7968;-3.8354,3.0011,-1.2852;-2.0547,2.5994,-3.2307;.4081,2.9593,-3.0788;2.1782,-5.9194,2.2892;1.7738,-6.4106,.2388;-4.3046,2.697,-2.3519;-4.4734,3.0584,-.255;6.6216,.167,-2.028;5.9478,1.4143,-1.8821;7.8019,.0987,-2.8187;8.2816,1.2096,-3.4672;8.3156,-.8632,-2.9116;9.1868,1.1447,-4.0772;6.4535,2.5391,-2.5923;7.5885,2.4394,-3.3607;5.9239,3.4919,-2.5297;7.9557,3.317,-3.9002;4.5751,3.8995,-.2328;3.7558,5.0492,-.0335;5.9224,3.9483,.2239;6.4368,5.088,.7939;6.5523,3.0623,.1243;7.4747,5.0995,1.1385;4.3209,6.2186,.5465;5.634,6.244,.9462;3.6829,7.0976,.6806;6.057,7.1469,1.3953;-2.3584,-3.945,-2.8614;-2.5389,-4.9786,-2.5282;-3.2331,-3.6254,-3.4584;-1.4856,-3.9433,-3.5334;-1.7029,-1.6041,-2.1001;-2.4423,-1.1358,-2.7754;-1.537,-.9349,-1.2405;-.7546,-1.6499,-2.6601;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662755749156</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.024007416187 0.001790615478 0.034005920602 0.005337724513</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044256852 -0.010008930 0.000136957 0.000209978 0.000269026 0.000332780 0.000356879 0.000418009 0.000484580 0.000579537 0.000650366 0.000777615 0.000801287 0.000989751 0.001070727 0.001116893 0.001245686 0.001257246 0.001289455 0.001433974 0.001471591 0.001542795 0.001751441 0.001852294 0.002154006 0.002417976 0.002532827 0.002774267 0.003199543 0.003276265 0.003955200 0.004175111 0.004459727 0.004630248 0.004867126 0.005521159 0.005591146 0.005891657 0.006214439 0.006766283 0.007377192 0.007529548 0.008065395 0.008683199 0.009097860 0.009558741 0.010046125 0.010268588 0.011012781 0.011436760 0.012809051 0.012902828 0.013604127 0.014350769 0.014723301 0.014857768 0.015310129 0.015601569 0.016060985 0.016394137 0.017266570 0.017822929 0.018571517 0.018901585 0.020369511 0.020928397 0.021700420 0.022213089 0.023039043 0.023394332 0.024573574 0.025946125 0.026213123 0.026660093 0.027046317 0.027770682 0.029000071 0.029818778 0.030425308 0.031758457 0.032346631 0.032750493 0.036426297 0.038217481 0.039335429 0.040217691 0.040933936 0.041456942 0.043271751 0.045255889 0.046150616 0.046805416 0.049669262 0.050658960 0.051315063 0.051552534 0.051803625 0.052279360 0.052357698 0.052396077 0.052598277 0.053860579 0.054734033 0.056489987 0.056519427 0.056857527 0.057080869 0.057703801 0.057731447 0.058538714 0.059219553 0.060438696 0.060607631 0.061298872 0.061509576 0.062265894 0.063737948 0.064570658 0.064910182 0.065799793 0.067855174 0.068157278 0.068925162 0.071680620 0.071894859 0.072663999 0.076470713 0.078282593 0.080563369 0.082262508 0.084652218 0.087261774 0.089481374 0.090838605 0.092841428 0.093356157 0.094215012 0.095262382 0.095489879 0.096467257 0.096905018 0.097341310 0.099295788 0.099448758 0.101223167 0.102459585 0.102756015 0.103205423 0.103883471 0.106005425 0.106933900 0.108351326 0.108981236 0.109686485 0.110270010 0.110705756 0.112575639 0.113862847 0.116214776 0.116531738 0.117322864 0.121337133 0.123026025 0.126345711 0.127561048 0.128675258 0.130665776 0.133054348 0.134446932 0.136667092 0.137327524 0.142119191 0.144514848 0.145595270 0.146203246 0.146703694 0.152519055 0.157301924 0.163586912 0.170449764 0.174090878 0.176074369 0.177874140 0.180512854 0.183221796 0.185580769 0.187168361 0.188378175 0.194937474 0.198365994 0.201816634 0.205027634 0.205385133 0.206793669 0.207158300 0.209067161 0.210773541 0.212773973 0.215595627 0.220347138 0.221585350 0.224822841 0.231520437 0.232708600 0.233634117 0.235099357 0.244492544 0.249082752 0.254526040 0.255340825 0.256708219 0.258812125 0.271370992 0.277528113 0.290036030 0.296210321 0.298250564 0.299439704 0.304225056 0.306178649 0.307544732 0.316843141 0.320578080 0.322785074 0.327036357 0.328885691 0.345872507 0.350595715 0.353749509 0.354734542 0.359179427 0.363837064 0.381402083 0.385083288 0.400616283 0.405711353 0.413768099 0.430086938 0.430687542 0.444971300 0.463799399 0.463922049 0.477880439 0.478038910 0.483271845 0.488349202 0.498024316 0.510457814 0.542414023 0.564950225 0.566770639 0.581402769 0.583346374 0.604361819 0.634384146 0.643702744 0.660805859 0.665435237 0.672014884 0.681380499 0.691514025 0.692084623 0.699424528 0.704241741 0.705306207 0.714502268 0.731647045 0.737321519 0.750680191 0.771576243 0.775841504 0.801241441 0.816677816 0.819835225 0.820559720 0.831079972 0.836605378 0.839786816 0.840914829 0.845785035 0.848858539 0.850077644 0.858002440 0.859971743 0.867343506 0.871538410 0.872389042 0.875894015 0.888996979 0.889641236 0.893749733 0.916355651 0.917810221 0.921569360 0.923920127 0.931415202 0.937368692 0.958394354 0.961678087 0.969433135 0.975854772 0.989231893 0.999617507 1.013026345 1.034035252 1.042617319 1.049250435 1.055251198 1.074766621 1.084191484 1.088663471 1.109990853 1.110585651 1.116231972 1.122412301 1.123319031 1.134114378 1.142710186 1.161202119 1.168748034 1.172604267 1.173239861 1.200405166 1.204254454 1.215878592 1.247293520 1.293410985 1.295698178 1.311539137 1.315419840 1.326278789 1.326871600 1.330137291 1.334469488 1.340951718 1.345835008 1.362192861 1.378764413 1.380726356 1.381124206 1.382271057 1.417799996 1.557474046 1.671852283 1.796992966</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">65</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9117328" y3="-0.95723764" z3="-0.69605629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59307595" y3="-1.95031316" z3="-1.57002943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0762038" y3="-0.99630759" z3="-1.42768688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77043483" y3="1.4767" z3="-1.06733962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28133361" y3="0.30809782" z3="-0.50941383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65329205" y3="2.74022084" z3="-1.15165711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00192371" y3="2.73426635" z3="-0.84261144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3766773" y3="4.99036078" z3="-0.35668362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80640366" y3="3.85383307" z3="-0.88006598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75121155" y3="5.86538128" z3="-0.15442564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08872906" y3="1.61775171" z3="-1.68472416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12057069" y3="0.35317129" z3="0.20751192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70771074" y3="0.38633392" z3="-0.6516324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60360457" y3="0.73658316" z3="0.2766622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65518454" y3="-0.85127532" z3="-1.51926274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09245739" y3="-2.47119954" z3="-1.32999534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02262495" y3="-5.51137446" z3="-6.26739628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75545098" y3="-5.07239828" z3="-5.30188225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05489508" y3="-3.92041472" z3="-2.85042186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71944034" y3="-3.69126212" z3="-5.16173024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46975686" y3="-5.89398587" z3="-4.2086264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13381449" y3="-5.31190773" z3="-2.99280155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37822817" y3="-3.08360572" z3="-3.9428648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94909901" y3="-3.02784766" z3="-5.99916056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52228334" y3="-6.9820593" z3="-4.29664572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94886263" y3="-5.94103654" z3="-2.11800072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65284261" y3="-3.36669521" z3="-1.60808221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34482776" y3="-3.8478308" z3="-0.85762467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68399017" y3="-4.8538601" z3="-1.11959981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37440154" y3="-3.54041989" z3="0.59024907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3937386" y3="-3.05315545" z3="3.34709358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66933245" y3="-4.57315068" z3="1.48884785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10795925" y3="-2.260135" z3="1.08385082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11469162" y3="-2.01850139" z3="2.45322832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67057959" y3="-4.33147681" z3="2.86149524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85611753" y3="-5.58403244" z3="1.11485811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09195481" y3="-1.42248477" z3="0.41537147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10780971" y3="-1.00808555" z3="2.80594566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8668591" y3="-5.15384103" z3="3.55436655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38844115" y3="-2.86704876" z3="4.42499684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32866751" y3="-1.74767439" z3="-3.91971939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46106767" y3="-1.33702237" z3="-3.01960954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33680061" y3="3.71720407" z3="-1.04658265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13347148" y3="-2.99291955" z3="-1.70823611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91769227" y3="-3.16100584" z3="-0.56223691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10848155" y3="-2.27561581" z3="0.36114352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83566308" y3="-0.71158894" z3="0.61507825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7090622" y3="-0.25258108" z3="-0.96845403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52561447" y3="0.46877593" z3="1.19026798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06689379" y3="-1.04487962" z3="1.98562095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39799961" y3="-4.37218087" z3="-0.31349391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10692052" y3="-4.60161112" z3="0.89482507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01747567" y3="0.02953435" z3="-1.776785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36056181" y3="0.62007152" z3="-0.78053635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34491932" y3="-1.07800625" z3="-1.32781112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63530574" y3="0.56303818" z3="0.54257013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.166546" y3="0.17603174" z3="2.19416592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99557716" y3="1.46710821" z3="1.2754281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52854431" y3="-0.10056445" z3="2.31767943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88262197" y3="-1.71921077" z3="1.65365834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56866056" y3="-1.49745104" z3="2.86167334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04461381" y3="-4.02084603" z3="0.91158369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48835804" y3="-4.33666804" z3="1.76771244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33567243" y3="-5.67715346" z3="0.90138281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27559662" y3="-2.20018075" z3="-0.18670602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13534493" y3="-3.2998593" z3="-1.04559571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49600492" y3="-4.46028705" z3="-0.62590584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00148678" y3="-4.51578777" z3="0.67168527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14699756" y3="-3.45480638" z3="1.5604981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7774392" y3="-2.29717234" z3="1.12242375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49046916" y3="-3.2294929" z3="-2.0769847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35679696" y3="-5.3027752" z3="-1.30393062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26903765" y3="-5.70604623" z3="1.1056799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74165702" y3="-3.53528527" z3="2.57020644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86889599" y3="-1.44779273" z3="1.80082049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49968066" y3="4.03072901" z3="0.03311195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87032132" y3="3.82043376" z3="-0.03821986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40188179" y3="3.294178" z3="-1.21017334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60504215" y3="3.00593356" z3="-2.31540239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2350968" y3="3.21560572" z3="-2.22491839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05978721" y3="4.39720143" z3="0.96399726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52399674" y3="4.03498033" z3="0.80785641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83579565" y3="3.00419726" z3="-1.27142438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05948045" y3="2.60721684" z3="-3.22282523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4037803" y3="2.96409957" z3="-3.07281976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17898337" y3="-5.91634103" z3="2.29423376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77528184" y3="-6.41104648" z3="0.24453907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31611049" y3="2.72545267" z3="-2.35718287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46906436" y3="3.04685927" z3="-0.23042821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61685027" y3="0.1664228" z3="-2.03524288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94377544" y3="1.41387108" z3="-1.88762938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79506014" y3="0.09786638" z3="-2.82909526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27322104" y3="1.2086427" z3="-3.4788305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30826342" y3="-0.86408576" z3="-2.92335461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17678795" y3="1.14355382" z3="-4.09134909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44785626" y3="2.53863535" z3="-2.59905923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5807752" y3="2.43869599" z3="-3.37046429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91865043" y3="3.49157268" z3="-2.53491446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94683864" y3="3.31622775" z3="-3.91089781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57541974" y3="3.89873472" z3="-0.23355503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75672479" y3="5.04821947" z3="-0.03104279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92376394" y3="3.94693509" z3="0.22003344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43958832" y3="5.08593965" z3="0.79019373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55337442" y3="3.06097531" z3="0.11812127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47829408" y3="5.09697705" z3="1.13239349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32321757" y3="6.21683699" z3="0.54906805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63718559" y3="6.24172937" z3="0.94575953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68552541" y3="7.09565224" z3="0.68572761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06124376" y3="7.14400323" z3="1.39508374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35529422" y3="-3.94903156" z3="-2.86303054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53723376" y3="-4.98171765" z3="-2.52766662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22941747" y3="-3.629467" z3="-3.46149947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48176837" y3="-3.94898413" z3="-3.53414636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70031534" y3="-1.60697778" z3="-2.10319151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43943542" y3="-1.13952475" z3="-2.77774691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53521792" y3="-0.93895866" z3="-1.2439005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7511358" y3="-1.65263298" z3="-2.66171902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9117,-.9572,-.6961;6.5931,-1.9503,-1.57;6.0762,-.9963,-1.4277;4.7704,1.4767,-1.0673;4.2813,.3081,-.5094;2.6533,2.7402,-1.1517;4.0019,2.7343,-.8426;2.3767,4.9904,-.3567;1.8064,3.8538,-.8801;1.7512,5.8654,-.1544;2.0887,1.6178,-1.6847;3.1206,.3532,.2075;1.7077,.3863,-.6516;.6036,.7366,.2767;1.6552,-.8513,-1.5193;1.0925,-2.4712,-1.33;2.0226,-5.5114,-6.2674;1.7555,-5.0724,-5.3019;1.0549,-3.9204,-2.8504;1.7194,-3.6913,-5.1617;1.4698,-5.894,-4.2086;1.1338,-5.3119,-2.9928;1.3782,-3.0836,-3.9429;1.9491,-3.0278,-5.9992;1.5223,-6.9821,-4.2966;.9489,-5.941,-2.118;.6528,-3.3667,-1.6081;-.3448,-3.8478,-.8576;-.684,-4.8539,-1.1196;-.3744,-3.5404,.5902;-.3937,-3.0532,3.3471;-.6693,-4.5732,1.4888;-.108,-2.2601,1.0839;-.1147,-2.0185,2.4532;-.6706,-4.3315,2.8615;-.8561,-5.584,1.1149;.092,-1.4225,.4154;.1078,-1.0081,2.8059;-.8669,-5.1538,3.5544;-.3884,-2.867,4.425;1.3287,-1.7477,-3.9197;1.4611,-1.337,-3.0196;.3368,3.7172,-1.0466;-2.1335,-2.9929,-1.7082;-2.9177,-3.161,-.5622;-3.1085,-2.2756,.3611;-3.8357,-.7116,.6151;-4.7091,-.2526,-.9685;-2.5256,.4688,1.1903;-5.0669,-1.0449,1.9856;-3.398,-4.3722,-.3135;-4.1069,-4.6016,.8948;-4.0175,.0295,-1.7768;-5.3606,.6201,-.7805;-5.3449,-1.078,-1.3278;-1.6353,.563,.5426;-2.1665,.176,2.1942;-2.9956,1.4671,1.2754;-5.5285,-.1006,2.3177;-5.8826,-1.7192,1.6537;-4.5687,-1.4975,2.8617;-5.0446,-4.0208,.9116;-3.4884,-4.3367,1.7677;-4.3357,-5.6772,.9014;4.2756,-2.2002,-.1867;4.1353,-3.2999,-1.0456;3.496,-4.4603,-.6259;3.0015,-4.5158,.6717;3.147,-3.4548,1.5605;3.7774,-2.2972,1.1224;4.4905,-3.2295,-2.077;3.3568,-5.3028,-1.3039;2.269,-5.706,1.1057;2.7417,-3.5353,2.5702;3.8689,-1.4478,1.8008;-.4997,4.0307,.0331;-1.8703,3.8204,-.0382;-2.4019,3.2942,-1.2102;-1.605,3.0059,-2.3154;-.2351,3.2156,-2.2249;-.0598,4.3972,.964;-2.524,4.035,.8079;-3.8358,3.0042,-1.2714;-2.0595,2.6072,-3.2228;.4038,2.9641,-3.0728;2.179,-5.9163,2.2942;1.7753,-6.411,.2445;-4.3161,2.7255,-2.3572;-4.4691,3.0469,-.2304;6.6169,.1664,-2.0352;5.9438,1.4139,-1.8876;7.7951,.0979,-2.8291;8.2732,1.2086,-3.4788;8.3083,-.8641,-2.9234;9.1768,1.1436,-4.0913;6.4479,2.5386,-2.5991;7.5808,2.4387,-3.3705;5.9187,3.4916,-2.5349;7.9468,3.3162,-3.9109;4.5754,3.8987,-.2336;3.7567,5.0482,-.031;5.9238,3.9469,.22;6.4396,5.0859,.7902;6.5534,3.061,.1181;7.4783,5.097,1.1324;4.3232,6.2168,.5491;5.6372,6.2417,.9458;3.6855,7.0957,.6857;6.0612,7.144,1.3951;-2.3553,-3.949,-2.863;-2.5372,-4.9817,-2.5277;-3.2294,-3.6295,-3.4615;-1.4818,-3.949,-3.5341;-1.7003,-1.607,-2.1032;-2.4394,-1.1395,-2.7777;-1.5352,-.939,-1.2439;-.7511,-1.6526,-2.6617;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662779873925</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.020217329181 0.001625976295 0.023825853659 0.005337965414</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044582512 -0.007258648 0.000139894 0.000210978 0.000269034 0.000333138 0.000360607 0.000418209 0.000489115 0.000596647 0.000651858 0.000781039 0.000802523 0.001018677 0.001080783 0.001134783 0.001247240 0.001261173 0.001292896 0.001434662 0.001476956 0.001579373 0.001752585 0.001864935 0.002154672 0.002443193 0.002589742 0.002827859 0.003239907 0.003296878 0.003955250 0.004180408 0.004470703 0.004629639 0.004872555 0.005527594 0.005591146 0.005944900 0.006219097 0.006766961 0.007382732 0.007530057 0.008067349 0.008690103 0.009101363 0.009558370 0.010053753 0.010269068 0.011007594 0.011643529 0.012808616 0.012903810 0.013600000 0.014350368 0.014724081 0.014857748 0.015313670 0.015601217 0.016062867 0.016394446 0.017292841 0.017838974 0.018587284 0.018912349 0.020369486 0.020963367 0.021791429 0.022213809 0.023039043 0.023395001 0.024573469 0.025950122 0.026259340 0.026668158 0.027115627 0.027770960 0.029018296 0.029822331 0.030425425 0.031766859 0.032346873 0.032751911 0.036423324 0.038218763 0.039339606 0.040218890 0.040948459 0.041473160 0.043273013 0.045256503 0.046150405 0.048121933 0.049669328 0.050671550 0.051359063 0.051566569 0.051805119 0.052281651 0.052387868 0.052558418 0.053414048 0.053889538 0.054735252 0.056493379 0.056829879 0.056930300 0.057215911 0.057720053 0.058533282 0.059219380 0.060176025 0.060443576 0.060644752 0.061437949 0.062220127 0.062566186 0.063776638 0.064589526 0.065029133 0.065871734 0.067856545 0.068295584 0.068936085 0.071670524 0.071924458 0.072664075 0.076483450 0.078362870 0.080575674 0.082270934 0.084839434 0.087294128 0.089482593 0.090838797 0.092841784 0.093378287 0.094215024 0.095263204 0.095512641 0.096474386 0.096903363 0.097404897 0.099421911 0.099524794 0.101224302 0.102509634 0.102773226 0.103244814 0.103893320 0.106474792 0.106932201 0.108525819 0.109157115 0.110073565 0.110269377 0.110877626 0.112583423 0.113859156 0.116219027 0.116532626 0.117328269 0.121346055 0.123056382 0.126430712 0.127563042 0.128751302 0.130690946 0.133058800 0.134446359 0.136666173 0.137378992 0.142120989 0.144521790 0.145595505 0.146227386 0.146716278 0.152519835 0.157302881 0.163782774 0.170472034 0.174160786 0.176100800 0.177972389 0.180515629 0.183228779 0.185596328 0.187169382 0.188401412 0.194968073 0.198401340 0.201816593 0.205069346 0.205389653 0.206795687 0.207159040 0.209069822 0.210830508 0.212804278 0.215623987 0.220386830 0.221961028 0.224828218 0.231521146 0.232708848 0.233666519 0.235114837 0.244502245 0.249082056 0.254545048 0.255342269 0.256708212 0.258811928 0.271371007 0.277587230 0.290036033 0.296221781 0.298249725 0.299459731 0.304264270 0.306196130 0.307544709 0.316874518 0.320581788 0.322785987 0.327055759 0.328914410 0.345962003 0.350612525 0.353787371 0.354745004 0.359181767 0.363847365 0.381564103 0.385468339 0.404690481 0.405826415 0.413764057 0.430087853 0.430702449 0.445004308 0.463804218 0.463932205 0.477881133 0.478081563 0.483535889 0.488368717 0.498025247 0.510716266 0.542490623 0.565058698 0.566774422 0.582628924 0.583497636 0.604391322 0.634453523 0.643821905 0.660912231 0.665445628 0.672190825 0.681380317 0.691515904 0.692134489 0.699437945 0.704241817 0.705313199 0.714595324 0.731673090 0.737340778 0.750680350 0.771576470 0.775843089 0.801306882 0.816697181 0.819839080 0.820609032 0.831170076 0.839449394 0.840460390 0.841036361 0.845901220 0.848881354 0.850421982 0.858148533 0.860975700 0.867343778 0.872018228 0.872454292 0.875909477 0.888996285 0.889641302 0.893771190 0.916398535 0.918406371 0.921679344 0.923922463 0.931418389 0.937779319 0.958408045 0.961696843 0.969449243 0.975855685 0.989233968 0.999617609 1.013028032 1.034037954 1.042617601 1.049253489 1.055252662 1.074848575 1.084192933 1.088666201 1.109990864 1.110585736 1.116238160 1.122412303 1.123319039 1.134114390 1.142711104 1.161202201 1.168750180 1.172605519 1.173242095 1.200406331 1.204268582 1.215919772 1.247295123 1.293461061 1.295704434 1.312473337 1.316089411 1.326279473 1.326892529 1.330137465 1.334474858 1.340952640 1.345834760 1.362201203 1.378765994 1.380769249 1.381148255 1.382493440 1.437293924 1.557474074 1.671852313 1.804549091</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">66</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90988392" y3="-0.95750028" z3="-0.69885746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58904384" y3="-1.95082014" z3="-1.57678656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0725252" y3="-0.99678632" z3="-1.43342139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76816543" y3="1.47643501" z3="-1.07013153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28007742" y3="0.30796929" z3="-0.51110517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65134411" y3="2.74075994" z3="-1.1492021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00063028" y3="2.73416657" z3="-0.84311925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37713817" y3="4.99012067" z3="-0.35090941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80549039" y3="3.85442282" z3="-0.87470703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75226746" y3="5.86503925" z3="-0.145999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08521952" y3="1.61869047" z3="-1.6817828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12073361" y3="0.35344257" z3="0.2081006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70631141" y3="0.38693913" z3="-0.64839208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6039036" y3="0.73660325" z3="0.28208716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65206856" y3="-0.85068188" z3="-1.51619437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09312826" y3="-2.47162193" z3="-1.32709914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03688448" y3="-5.51446758" z3="-6.26031446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76677673" y3="-5.07504819" z3="-5.29580389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05917914" y3="-3.9219768" z3="-2.84708944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73047711" y3="-3.69390124" z3="-5.15637882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4776769" y3="-5.8962143" z3="-4.20305876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13820062" y3="-5.31357882" z3="-2.98854983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38576907" y3="-3.08546314" z3="-3.93875984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96287042" y3="-3.03087744" z3="-5.99335899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53036675" y3="-6.98433114" z3="-4.29042816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95101906" y3="-5.94236508" z3="-2.11396658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65452398" y3="-3.36777648" z3="-1.60556726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3398227" y3="-3.85227888" z3="-0.85422279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68255508" y3="-4.85535622" z3="-1.11903924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37417065" y3="-3.54238571" z3="0.59214116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39439076" y3="-3.05395956" z3="3.34827003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66950247" y3="-4.57514146" z3="1.4905224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11003659" y3="-2.26016707" z3="1.08468221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11672647" y3="-2.01828514" z3="2.45404349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67071143" y3="-4.33313381" z3="2.86320566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85638966" y3="-5.5860396" z3="1.1165226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08775452" y3="-1.42147589" z3="0.4151211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10480962" y3="-1.00669918" z3="2.80610595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86646988" y3="-5.15574308" z3="3.55649738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38889276" y3="-2.8678821" z3="4.42629468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3368041" y3="-1.74970417" z3="-3.91672483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46501462" y3="-1.33788865" z3="-3.01633856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3354669" y3="3.71877461" z3="-1.03861622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13603203" y3="-2.99299222" z3="-1.71040832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91688195" y3="-3.16109454" z3="-0.56342249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10778502" y3="-2.27949635" z3="0.36222599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83683211" y3="-0.70976208" z3="0.60592587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7043865" y3="-0.24630129" z3="-0.97524041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52859996" y3="0.46793326" z3="1.18885323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07481463" y3="-1.04319975" z3="1.96761552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39800281" y3="-4.37053338" z3="-0.31442843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10699299" y3="-4.59923947" z3="0.89394476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0089187" y3="0.04253466" z3="-1.77832963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36408737" y3="0.62352063" z3="-0.79133547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33387068" y3="-1.07751139" z3="-1.35080945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6385791" y3="0.56854678" z3="0.54033951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16622501" y3="0.16652701" z3="2.18662054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99552539" y3="1.46412155" z3="1.28629197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53700477" y3="-0.0921434" z3="2.29385358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88599724" y3="-1.71329794" z3="1.64269967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58088084" y3="-1.4968359" z3="2.8434357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04231196" y3="-4.01695905" z3="0.91156308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49244866" y3="-4.3398397" z3="1.76762414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33872543" y3="-5.67093475" z3="0.89712437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27501976" y3="-2.2002292" z3="-0.1874397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13559556" y3="-3.30149883" z3="-1.04449322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49721522" y3="-4.46178284" z3="-0.62286448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00238623" y3="-4.5154001" z3="0.67469376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14736763" y3="-3.45291788" z3="1.56184425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77722474" y3="-2.29564784" z3="1.12198648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49062617" y3="-3.23271542" z3="-2.07603018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35896337" y3="-5.30564314" z3="-1.29946037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27038704" y3="-5.70533996" z3="1.1105096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74221028" y3="-3.53206967" z3="2.57171939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86836838" y3="-1.44532865" z3="1.79921741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49871738" y3="4.02981985" z3="0.04403521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86987404" y3="3.82140783" z3="-0.02581289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40450834" y3="3.3003219" z3="-1.19954439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60936163" y3="3.01293757" z3="-2.30629324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23891507" y3="3.22049971" z3="-2.21728281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0570036" y3="4.39401059" z3="0.97481561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5219537" y3="4.03455879" z3="0.82191198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84078393" y3="3.01488177" z3="-1.26307279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06590301" y3="2.61765985" z3="-3.21486562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39823314" y3="2.97107301" z3="-3.06761612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18068135" y3="-5.91417364" z3="2.29939971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77658157" y3="-6.41147924" z3="0.25027035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31609351" y3="2.72722072" z3="-2.33551649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47314638" y3="3.05825818" z3="-0.22479316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61171784" y3="0.16572368" z3="-2.04267234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93939648" y3="1.41336263" z3="-1.89332056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78766685" y3="0.09681788" z3="-2.83983917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2642837" y3="1.20745119" z3="-3.49095055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30030743" y3="-0.86528859" z3="-2.93556998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16605523" y3="1.14207215" z3="-4.10607591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44187739" y3="2.53805112" z3="-2.60598278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57258971" y3="2.4377618" z3="-3.38056659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91313622" y3="3.49115111" z3="-2.54023272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93744768" y3="3.31518686" z3="-3.92198633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57589497" y3="3.89785438" z3="-0.23419077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75790398" y3="5.04726644" z3="-0.02823036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9253655" y3="3.94522866" z3="0.21616932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44276965" y3="5.08342094" z3="0.78659015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55459868" y3="3.05927369" z3="0.11167258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4823193" y3="5.09382813" z3="1.12628438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3259703" y3="6.21502698" z3="0.55214435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64091586" y3="6.23915779" z3="0.94569889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68875136" y3="7.0937906" z3="0.69154753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06621396" y3="7.14076137" z3="1.39524708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35284733" y3="-3.95371096" z3="-2.86338825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53548836" y3="-4.98568692" z3="-2.52710449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22524643" y3="-3.63608038" z3="-3.46596758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47778954" y3="-3.95548663" z3="-3.53271362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69822441" y3="-1.60943672" z3="-2.10692556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43601974" y3="-1.14210581" z3="-2.78464885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53357229" y3="-0.94003596" z3="-1.24819339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75088419" y3="-1.65596722" z3="-2.66596527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9099,-.9575,-.6989;6.589,-1.9508,-1.5768;6.0725,-.9968,-1.4334;4.7682,1.4764,-1.0701;4.2801,.308,-.5111;2.6513,2.7408,-1.1492;4.0006,2.7342,-.8431;2.3771,4.9901,-.3509;1.8055,3.8544,-.8747;1.7523,5.865,-.146;2.0852,1.6187,-1.6818;3.1207,.3534,.2081;1.7063,.3869,-.6484;.6039,.7366,.2821;1.6521,-.8507,-1.5162;1.0931,-2.4716,-1.3271;2.0369,-5.5145,-6.2603;1.7668,-5.075,-5.2958;1.0592,-3.922,-2.8471;1.7305,-3.6939,-5.1564;1.4777,-5.8962,-4.2031;1.1382,-5.3136,-2.9885;1.3858,-3.0855,-3.9388;1.9629,-3.0309,-5.9934;1.5304,-6.9843,-4.2904;.951,-5.9424,-2.114;.6545,-3.3678,-1.6056;-.3398,-3.8523,-.8542;-.6826,-4.8554,-1.119;-.3742,-3.5424,.5921;-.3944,-3.054,3.3483;-.6695,-4.5751,1.4905;-.11,-2.2602,1.0847;-.1167,-2.0183,2.454;-.6707,-4.3331,2.8632;-.8564,-5.586,1.1165;.0878,-1.4215,.4151;.1048,-1.0067,2.8061;-.8665,-5.1557,3.5565;-.3889,-2.8679,4.4263;1.3368,-1.7497,-3.9167;1.465,-1.3379,-3.0163;.3355,3.7188,-1.0386;-2.136,-2.993,-1.7104;-2.9169,-3.1611,-.5634;-3.1078,-2.2795,.3622;-3.8368,-.7098,.6059;-4.7044,-.2463,-.9752;-2.5286,.4679,1.1889;-5.0748,-1.0432,1.9676;-3.398,-4.3705,-.3144;-4.107,-4.5992,.8939;-4.0089,.0425,-1.7783;-5.3641,.6235,-.7913;-5.3339,-1.0775,-1.3508;-1.6386,.5685,.5403;-2.1662,.1665,2.1866;-2.9955,1.4641,1.2863;-5.537,-.0921,2.2939;-5.886,-1.7133,1.6427;-4.5809,-1.4968,2.8434;-5.0423,-4.017,.9116;-3.4924,-4.3398,1.7676;-4.3387,-5.6709,.8971;4.275,-2.2002,-.1874;4.1356,-3.3015,-1.0445;3.4972,-4.4618,-.6229;3.0024,-4.5154,.6747;3.1474,-3.4529,1.5618;3.7772,-2.2956,1.122;4.4906,-3.2327,-2.076;3.359,-5.3056,-1.2995;2.2704,-5.7053,1.1105;2.7422,-3.5321,2.5717;3.8684,-1.4453,1.7992;-.4987,4.0298,.044;-1.8699,3.8214,-.0258;-2.4045,3.3003,-1.1995;-1.6094,3.0129,-2.3063;-.2389,3.2205,-2.2173;-.057,4.394,.9748;-2.522,4.0346,.8219;-3.8408,3.0149,-1.2631;-2.0659,2.6177,-3.2149;.3982,2.9711,-3.0676;2.1807,-5.9142,2.2994;1.7766,-6.4115,.2503;-4.3161,2.7272,-2.3355;-4.4731,3.0583,-.2248;6.6117,.1657,-2.0427;5.9394,1.4134,-1.8933;7.7877,.0968,-2.8398;8.2643,1.2075,-3.491;8.3003,-.8653,-2.9356;9.1661,1.1421,-4.1061;6.4419,2.5381,-2.606;7.5726,2.4378,-3.3806;5.9131,3.4912,-2.5402;7.9374,3.3152,-3.922;4.5759,3.8979,-.2342;3.7579,5.0473,-.0282;5.9254,3.9452,.2162;6.4428,5.0834,.7866;6.5546,3.0593,.1117;7.4823,5.0938,1.1263;4.326,6.215,.5521;5.6409,6.2392,.9457;3.6888,7.0938,.6915;6.0662,7.1408,1.3952;-2.3528,-3.9537,-2.8634;-2.5355,-4.9857,-2.5271;-3.2252,-3.6361,-3.466;-1.4778,-3.9555,-3.5327;-1.6982,-1.6094,-2.1069;-2.436,-1.1421,-2.7846;-1.5336,-.94,-1.2482;-.7509,-1.656,-2.666;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662847660720</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010727379359 0.001084816776 0.022527735762 0.005337149879</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044877003 -0.004457044 0.000138457 0.000216598 0.000269422 0.000333079 0.000365314 0.000418974 0.000493156 0.000617337 0.000657160 0.000782557 0.000803087 0.001038952 0.001099816 0.001146347 0.001247038 0.001276062 0.001302424 0.001436396 0.001476506 0.001614600 0.001753376 0.001865061 0.002158674 0.002442407 0.002590409 0.002889787 0.003256463 0.003368258 0.003955626 0.004219638 0.004522266 0.004631883 0.004891666 0.005558946 0.005591293 0.005993164 0.006226376 0.006766915 0.007386219 0.007532167 0.008083563 0.008718802 0.009121090 0.009596928 0.010060439 0.010272299 0.011132459 0.011634707 0.012810638 0.012954076 0.013668094 0.014355407 0.014738538 0.014857543 0.015313455 0.015605607 0.016062676 0.016394359 0.017292285 0.017838990 0.018592127 0.018914453 0.020369587 0.020960974 0.021783919 0.022213776 0.023039105 0.023394906 0.024573524 0.025950302 0.026265515 0.026670643 0.027143678 0.027772678 0.029025749 0.029826276 0.030425387 0.031768514 0.032346919 0.032752388 0.036442915 0.038219170 0.039339672 0.040223883 0.040954974 0.041508604 0.043276662 0.045256451 0.046150569 0.048269376 0.049669360 0.050674774 0.051363709 0.051568216 0.051806879 0.052281688 0.052387915 0.052559254 0.053538955 0.053901001 0.054735930 0.056493347 0.056833295 0.056939962 0.057224577 0.057719970 0.058534800 0.059219375 0.060405247 0.060477251 0.060696806 0.061446554 0.062251739 0.063182905 0.063826650 0.064601640 0.065159855 0.065895725 0.067865935 0.068515857 0.069429597 0.071753516 0.072062445 0.072663966 0.076488713 0.078388716 0.080613442 0.082272674 0.085265250 0.087311826 0.089483585 0.090838863 0.092841741 0.093389030 0.094215107 0.095263458 0.095532910 0.096477490 0.096906643 0.097426446 0.099436305 0.099698234 0.101224691 0.102532046 0.102773799 0.103408110 0.103954055 0.106533716 0.106937684 0.108523976 0.109514008 0.110264618 0.110708252 0.111116075 0.112597531 0.113880766 0.116222508 0.116534594 0.117341228 0.121347293 0.123067715 0.126467027 0.127563066 0.128790556 0.130852522 0.133083276 0.134465328 0.136666163 0.137728284 0.142120820 0.144524004 0.145599084 0.146253592 0.146757068 0.152518790 0.157303387 0.164249637 0.170486762 0.174195137 0.176138248 0.177971619 0.180515873 0.183231053 0.185595254 0.187172471 0.188484157 0.194980208 0.198498908 0.201816565 0.205091308 0.205391287 0.206796627 0.207159341 0.209073658 0.210873016 0.212818967 0.215635464 0.220425378 0.222282261 0.224831140 0.231521123 0.232708824 0.233691503 0.235127040 0.244505479 0.249098818 0.254563657 0.255342202 0.256708280 0.258814283 0.271371003 0.277633002 0.290036296 0.296230896 0.298255001 0.299469339 0.304278301 0.306210981 0.307544776 0.316980193 0.320582086 0.322786017 0.327110888 0.328927752 0.345986172 0.350616471 0.353811503 0.354748727 0.359191251 0.363851197 0.381615430 0.385486891 0.405554738 0.408286622 0.413794397 0.430087746 0.430748754 0.445078917 0.463807920 0.463941955 0.477881183 0.478086378 0.483598936 0.488959452 0.498026449 0.510764084 0.542512782 0.565082963 0.566775131 0.582841161 0.583692033 0.604400113 0.634458573 0.643875643 0.661761259 0.665558225 0.672230348 0.681385764 0.691565204 0.693565487 0.699502275 0.704241834 0.705315607 0.714604598 0.731894409 0.737341233 0.750680435 0.771576748 0.775843302 0.801326147 0.816738698 0.819842227 0.820632701 0.831180463 0.839637957 0.840860369 0.842317495 0.845980227 0.848884921 0.850640874 0.858237819 0.862341675 0.867343786 0.872207167 0.872664376 0.875934799 0.889078661 0.889805838 0.893778688 0.916402686 0.918396319 0.921896639 0.923925812 0.931425363 0.938051769 0.958430951 0.961705220 0.969452708 0.975856358 0.989234229 0.999617593 1.013028435 1.034038599 1.042617711 1.049257270 1.055253832 1.074861923 1.084193365 1.088666965 1.109990881 1.110585855 1.116238271 1.122412303 1.123319073 1.134119179 1.142728360 1.161206596 1.168752667 1.172610931 1.173243962 1.200407956 1.204283560 1.216090179 1.247295814 1.293538288 1.295705419 1.312614741 1.316270698 1.326280207 1.326900769 1.330137481 1.334482848 1.340957508 1.345845765 1.362203780 1.378766136 1.380772266 1.381150944 1.382518003 1.444052848 1.557474725 1.671852319 1.811162800</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">67</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90849854" y3="-0.95754764" z3="-0.70121946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58558614" y3="-1.95106009" z3="-1.58296252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0693451" y3="-0.99702045" z3="-1.43865861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76616916" y3="1.47634579" z3="-1.07281599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27919191" y3="0.30806767" z3="-0.51244246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64949648" y3="2.74118112" z3="-1.14696704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99945373" y3="2.73421136" z3="-0.84388613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37751461" y3="4.98999669" z3="-0.34671223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80448595" y3="3.85484215" z3="-0.87001536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75327975" y3="5.86480372" z3="-0.140003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08207067" y3="1.61942407" z3="-1.67857155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12141578" y3="0.35410167" z3="0.20922004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70525048" y3="0.38749666" z3="-0.64450543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60459341" y3="0.73711046" z3="0.28805695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64962481" y3="-0.8499511" z3="-1.51218879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0933119" y3="-2.47192192" z3="-1.32449819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.05062924" y3="-5.51642436" z3="-6.2537419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77770418" y3="-5.07679461" z3="-5.29015017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06320603" y3="-3.92301444" z3="-2.84354676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7413526" y3="-3.69561175" z3="-5.15102544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48499361" y3="-5.8976296" z3="-4.19816237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14220067" y3="-5.31465669" z3="-2.98475201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39305288" y3="-3.08694041" z3="-3.93462533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97645102" y3="-3.03277714" z3="-5.98739489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5376298" y3="-6.98577872" z3="-4.28513177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95253071" y3="-5.9433067" z3="-2.11062877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6562011" y3="-3.36848428" z3="-1.60321546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34176826" y3="-3.85075513" z3="-0.85442974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68074409" y3="-4.85664973" z3="-1.11746309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3756761" y3="-3.54264365" z3="0.59288195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39700333" y3="-3.05577749" z3="3.34938218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67136715" y3="-4.57555923" z3="1.49087167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11105076" y3="-2.26201619" z3="1.08659415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11829987" y3="-2.02063286" z3="2.45600608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67344727" y3="-4.33407465" z3="2.86350282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85756224" y3="-5.58669335" z3="1.11676518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08866159" y3="-1.42414225" z3="0.41867277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1034131" y3="-1.00994362" z3="2.80882182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86980604" y3="-5.15671329" z3="3.55590846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39139218" y3="-2.87017077" z3="4.42741407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34418971" y3="-1.75104793" z3="-3.91305809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46921932" y3="-1.33890243" z3="-3.01261326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33411893" y3="3.72001605" z3="-1.03154494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13199206" y3="-2.9970593" z3="-1.71108565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91731643" y3="-3.16144994" z3="-0.56564536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10816982" y3="-2.27522887" z3="0.35614163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83684897" y3="-0.71112334" z3="0.60399881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69306468" y3="-0.24294251" z3="-0.99276837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53037377" y3="0.46429189" z3="1.190712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08660887" y3="-1.04160557" z3="1.95862573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40072236" y3="-4.36906332" z3="-0.31676765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10986749" y3="-4.59717278" z3="0.89171071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98833718" y3="0.05260373" z3="-1.78882739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34905795" y3="0.62375616" z3="-0.8053488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3219728" y3="-1.06690341" z3="-1.36597649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64401405" y3="0.56527474" z3="0.53968687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16583086" y3="0.15846136" z3="2.18614216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9979397" y3="1.4629826" z3="1.29119181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54571947" y3="-0.08899278" z3="2.28060625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90333969" y3="-1.70742827" z3="1.62017194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60295179" y3="-1.50254878" z3="2.84062328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04749664" y3="-4.01710781" z3="0.90793945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49167699" y3="-4.3298589" z3="1.76473965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33745464" y3="-5.67286366" z3="0.90078901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27491961" y3="-2.20015408" z3="-0.18785597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13598349" y3="-3.30266152" z3="-1.04332257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49837621" y3="-4.46272301" z3="-0.61999134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00356689" y3="-4.51487457" z3="0.67759962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14835303" y3="-3.45126306" z3="1.56334966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77771079" y3="-2.29433847" z3="1.12191643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49061188" y3="-3.23512352" z3="-2.07506987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36048306" y3="-5.30740877" z3="-1.29544612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27155804" y3="-5.7042345" z3="1.11478616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74338446" y3="-3.5291994" z3="2.57339866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86875734" y3="-1.44328309" z3="1.79817043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49823895" y3="4.02957032" z3="0.05251782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86962242" y3="3.82236192" z3="-0.01548854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40618309" y3="3.30380715" z3="-1.18884607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61316727" y3="3.01858075" z3="-2.29743211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24244028" y3="3.22478067" z3="-2.21022773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05473754" y3="4.39123827" z3="0.9834267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52004196" y3="4.03387543" z3="0.83395205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84152823" y3="3.01867574" z3="-1.24835274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07109878" y3="2.62522057" z3="-3.20534835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3929158" y3="2.97683573" z3="-3.06197182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18163778" y3="-5.91152423" z3="2.30389935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77786669" y3="-6.41143739" z3="0.25541609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3233784" y3="2.74448961" z3="-2.32907743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47213038" y3="3.05767214" z3="-0.20895942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60700925" y3="0.16523102" z3="-2.04975039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93530646" y3="1.41300356" z3="-1.89889163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78070146" y3="0.09595919" z3="-2.85020475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25566059" y3="1.20636551" z3="-3.50291776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29286922" y3="-0.86626156" z3="-2.94722582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15562082" y3="1.14066745" z3="-4.12065786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43608874" y3="2.53751465" z3="-2.61300504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5645937" y3="2.43685833" z3="-3.39075264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90771485" y3="3.49071768" z3="-2.54585956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92813597" y3="3.31410919" z3="-3.93333626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57630637" y3="3.89737253" z3="-0.23560936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75898303" y3="5.04668236" z3="-0.02695809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92678345" y3="3.94419971" z3="0.21170967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44561708" y3="5.08179013" z3="0.78192599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55563121" y3="3.05828446" z3="0.10513621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4859042" y3="5.09177792" z3="1.11929264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32851424" y3="6.21380347" z3="0.55317645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64429866" y3="6.23741432" z3="0.94384806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69176582" y3="7.09249196" z3="0.69480757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07070835" y3="7.1385149" z3="1.39327993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35032565" y3="-3.95627523" z3="-2.86358925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53482986" y3="-4.98758984" z3="-2.52649922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22090325" y3="-3.63770878" z3="-3.46689122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47397388" y3="-3.95945396" z3="-3.53101464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69725696" y3="-1.61212146" z3="-2.10996285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4340529" y3="-1.1459195" z3="-2.78916399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53378741" y3="-0.94008589" z3="-1.2520991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74594745" y3="-1.6605345" z3="-2.66569626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9085,-.9575,-.7012;6.5856,-1.9511,-1.583;6.0693,-.997,-1.4387;4.7662,1.4763,-1.0728;4.2792,.3081,-.5124;2.6495,2.7412,-1.147;3.9995,2.7342,-.8439;2.3775,4.99,-.3467;1.8045,3.8548,-.87;1.7533,5.8648,-.14;2.0821,1.6194,-1.6786;3.1214,.3541,.2092;1.7053,.3875,-.6445;.6046,.7371,.2881;1.6496,-.85,-1.5122;1.0933,-2.4719,-1.3245;2.0506,-5.5164,-6.2537;1.7777,-5.0768,-5.2902;1.0632,-3.923,-2.8435;1.7414,-3.6956,-5.151;1.485,-5.8976,-4.1982;1.1422,-5.3147,-2.9848;1.3931,-3.0869,-3.9346;1.9765,-3.0328,-5.9874;1.5376,-6.9858,-4.2851;.9525,-5.9433,-2.1106;.6562,-3.3685,-1.6032;-.3418,-3.8508,-.8544;-.6807,-4.8566,-1.1175;-.3757,-3.5426,.5929;-.397,-3.0558,3.3494;-.6714,-4.5756,1.4909;-.1111,-2.262,1.0866;-.1183,-2.0206,2.456;-.6734,-4.3341,2.8635;-.8576,-5.5867,1.1168;.0887,-1.4241,.4187;.1034,-1.0099,2.8088;-.8698,-5.1567,3.5559;-.3914,-2.8702,4.4274;1.3442,-1.751,-3.9131;1.4692,-1.3389,-3.0126;.3341,3.72,-1.0315;-2.132,-2.9971,-1.7111;-2.9173,-3.1614,-.5656;-3.1082,-2.2752,.3561;-3.8368,-.7111,.604;-4.6931,-.2429,-.9928;-2.5304,.4643,1.1907;-5.0866,-1.0416,1.9586;-3.4007,-4.3691,-.3168;-4.1099,-4.5972,.8917;-3.9883,.0526,-1.7888;-5.3491,.6238,-.8053;-5.322,-1.0669,-1.366;-1.644,.5653,.5397;-2.1658,.1585,2.1861;-2.9979,1.463,1.2912;-5.5457,-.089,2.2806;-5.9033,-1.7074,1.6202;-4.603,-1.5025,2.8406;-5.0475,-4.0171,.9079;-3.4917,-4.3299,1.7647;-4.3375,-5.6729,.9008;4.2749,-2.2002,-.1879;4.136,-3.3027,-1.0433;3.4984,-4.4627,-.62;3.0036,-4.5149,.6776;3.1484,-3.4513,1.5633;3.7777,-2.2943,1.1219;4.4906,-3.2351,-2.0751;3.3605,-5.3074,-1.2954;2.2716,-5.7042,1.1148;2.7434,-3.5292,2.5734;3.8688,-1.4433,1.7982;-.4982,4.0296,.0525;-1.8696,3.8224,-.0155;-2.4062,3.3038,-1.1888;-1.6132,3.0186,-2.2974;-.2424,3.2248,-2.2102;-.0547,4.3912,.9834;-2.52,4.0339,.834;-3.8415,3.0187,-1.2484;-2.0711,2.6252,-3.2053;.3929,2.9768,-3.062;2.1816,-5.9115,2.3039;1.7779,-6.4114,.2554;-4.3234,2.7445,-2.3291;-4.4721,3.0577,-.209;6.607,.1652,-2.0498;5.9353,1.413,-1.8989;7.7807,.096,-2.8502;8.2557,1.2064,-3.5029;8.2929,-.8663,-2.9472;9.1556,1.1407,-4.1207;6.4361,2.5375,-2.613;7.5646,2.4369,-3.3908;5.9077,3.4907,-2.5459;7.9281,3.3141,-3.9333;4.5763,3.8974,-.2356;3.759,5.0467,-.027;5.9268,3.9442,.2117;6.4456,5.0818,.7819;6.5556,3.0583,.1051;7.4859,5.0918,1.1193;4.3285,6.2138,.5532;5.6443,6.2374,.9438;3.6918,7.0925,.6948;6.0707,7.1385,1.3933;-2.3503,-3.9563,-2.8636;-2.5348,-4.9876,-2.5265;-3.2209,-3.6377,-3.4669;-1.474,-3.9595,-3.531;-1.6973,-1.6121,-2.11;-2.4341,-1.1459,-2.7892;-1.5338,-.9401,-1.2521;-.7459,-1.6605,-2.6657;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662852306183</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007805621182 0.000886208985 0.023042772071 0.005336901662</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044948178 -0.004190892 0.000138550 0.000217190 0.000274667 0.000332981 0.000365469 0.000418802 0.000493173 0.000620795 0.000660125 0.000783940 0.000803676 0.001042765 0.001106748 0.001147148 0.001247030 0.001287622 0.001301204 0.001436207 0.001485858 0.001616810 0.001754891 0.001894023 0.002175708 0.002470790 0.002600552 0.002916349 0.003268660 0.003412064 0.003957085 0.004275304 0.004601882 0.004647445 0.004954087 0.005588701 0.005640980 0.006052238 0.006244781 0.006767254 0.007386973 0.007538352 0.008110679 0.008761779 0.009157506 0.009752207 0.010064019 0.010273671 0.011349024 0.011790912 0.012811280 0.013029619 0.013842563 0.014370784 0.014831471 0.014857338 0.015315932 0.015618852 0.016062744 0.016394314 0.017315900 0.017843444 0.018593609 0.018914262 0.020369696 0.020986403 0.021851899 0.022215363 0.023039110 0.023395653 0.024573640 0.025950331 0.026265404 0.026670559 0.027144129 0.027773547 0.029035081 0.029827655 0.030425355 0.031768481 0.032347185 0.032752566 0.036484216 0.038224204 0.039344644 0.040256666 0.040970495 0.041504240 0.043314190 0.045256843 0.046150761 0.048266580 0.049669353 0.050674518 0.051363795 0.051568247 0.051807663 0.052281688 0.052387918 0.052559907 0.053530725 0.053901029 0.054737010 0.056493330 0.056833492 0.056941694 0.057224072 0.057721606 0.058540383 0.059219511 0.060402844 0.060474919 0.060693899 0.061460296 0.062271364 0.063189925 0.063821720 0.064602286 0.065171942 0.065900169 0.067891408 0.068532903 0.069924643 0.071841416 0.072556444 0.072664175 0.076488536 0.078390911 0.080637550 0.082272691 0.085321261 0.087314201 0.089483468 0.090839782 0.092841766 0.093389005 0.094215079 0.095263438 0.095531475 0.096477739 0.096913543 0.097425077 0.099439528 0.099760574 0.101224660 0.102537492 0.102777197 0.103578460 0.104027188 0.106589669 0.106944118 0.108561417 0.109793596 0.110265060 0.110896471 0.112115279 0.112672368 0.113931714 0.116225068 0.116536931 0.117352099 0.121352045 0.123072057 0.126481142 0.127565715 0.128802459 0.131090892 0.133082173 0.134551226 0.136669486 0.138259351 0.142120767 0.144525157 0.145599292 0.146306283 0.146781555 0.152518022 0.157303154 0.164711094 0.170492684 0.174192954 0.176178434 0.178447845 0.180519248 0.183231248 0.185600248 0.187183898 0.188540970 0.194998036 0.198549749 0.201816533 0.205098857 0.205392008 0.206796630 0.207159412 0.209076246 0.210890458 0.212823213 0.215638540 0.220464886 0.222810774 0.224833536 0.231521191 0.232708765 0.233704305 0.235133477 0.244506872 0.249139462 0.254573225 0.255342430 0.256708541 0.258815570 0.271371126 0.277652318 0.290036342 0.296234612 0.298265549 0.299474631 0.304282535 0.306218141 0.307544839 0.317069499 0.320582171 0.322786017 0.327166369 0.328932238 0.345994496 0.350618543 0.353810986 0.354750780 0.359195159 0.363852436 0.381657602 0.385518807 0.405577078 0.409328624 0.414281002 0.430090582 0.430746900 0.445099628 0.463823618 0.463955415 0.477881205 0.478087465 0.483601696 0.489763564 0.498026901 0.510767054 0.542516566 0.565087057 0.566775151 0.582856318 0.583748767 0.604401878 0.634626937 0.643890777 0.662414862 0.665736556 0.672238963 0.681392013 0.691591375 0.696840776 0.700319742 0.704242341 0.705318381 0.714604842 0.732380415 0.737342959 0.750680473 0.771577088 0.775843298 0.801326384 0.816764700 0.819850452 0.820640495 0.831180336 0.839725141 0.840906082 0.843684920 0.845996954 0.848899566 0.850918110 0.858267137 0.862863620 0.867343787 0.872214978 0.872661252 0.875941719 0.889132188 0.890052961 0.893779327 0.916423409 0.918680581 0.922328003 0.923932573 0.931437362 0.938135086 0.958443387 0.961705194 0.969452647 0.975856356 0.989234761 0.999617597 1.013032538 1.034039120 1.042617717 1.049260281 1.055253978 1.074883009 1.084194030 1.088667162 1.109991062 1.110586213 1.116246398 1.122412311 1.123319061 1.134128212 1.142763254 1.161213735 1.168754056 1.172618481 1.173245036 1.200408949 1.204293598 1.216172938 1.247296385 1.293537406 1.295705534 1.312637066 1.316301016 1.326280317 1.326905272 1.330137485 1.334483093 1.340961890 1.345858176 1.362207873 1.378766399 1.380772264 1.381151046 1.382517928 1.445380148 1.557475627 1.671852395 1.814862568</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">68</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90685675" y3="-0.95771098" z3="-0.70309253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58190539" y3="-1.95169966" z3="-1.58821907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06602338" y3="-0.99758178" z3="-1.44319356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76416974" y3="1.47605691" z3="-1.07532822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27812968" y3="0.30809042" z3="-0.51352256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64780223" y3="2.7417305" z3="-1.14479936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99842271" y3="2.73418599" z3="-0.84470299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37841772" y3="4.99033444" z3="-0.34286965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80388959" y3="3.85566382" z3="-0.86561158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75487489" y3="5.8652525" z3="-0.13427083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07873418" y3="1.62021223" z3="-1.67535258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12178545" y3="0.35476864" z3="0.21042834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70397853" y3="0.38829037" z3="-0.64059324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60491141" y3="0.73751371" z3="0.29394427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64665527" y3="-0.84924525" z3="-1.50824998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09373715" y3="-2.47205177" z3="-1.32171422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06424046" y3="-5.51845565" z3="-6.24704769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.78843382" y3="-5.07853359" z3="-5.28439009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06704389" y3="-3.92405912" z3="-2.84024582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75205041" y3="-3.69733478" z3="-5.14567275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49205625" y3="-5.89910063" z3="-4.19314124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14585687" y3="-5.31576707" z3="-2.98088819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40021811" y3="-3.08819878" z3="-3.93043526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98995007" y3="-3.0347083" z3="-5.98142362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54452484" y3="-6.98727931" z3="-4.27976006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95363342" y3="-5.94422652" z3="-2.10719027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65735168" y3="-3.36896446" z3="-1.60089682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33960224" y3="-3.85291861" z3="-0.85250947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67973348" y3="-4.85736281" z3="-1.11683517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37666932" y3="-3.54338497" z3="0.59413289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39928071" y3="-3.05706446" z3="3.35061684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67323307" y3="-4.57647104" z3="1.49160611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11216804" y3="-2.26249861" z3="1.08813912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11998678" y3="-2.02160078" z3="2.45760264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67596382" y3="-4.33529051" z3="2.86426894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85976974" y3="-5.5869222" z3="1.11675159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08744662" y3="-1.42410462" z3="0.41972082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10195498" y3="-1.01106355" z3="2.81085284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87294572" y3="-5.15798117" z3="3.55657832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3944624" y3="-2.87159284" z3="4.42863672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35180972" y3="-1.75244705" z3="-3.90954459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47270233" y3="-1.33951885" z3="-3.00870995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33311469" y3="3.72180952" z3="-1.0244215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13200119" y3="-2.99759013" z3="-1.71432441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91645931" y3="-3.16219282" z3="-0.5695942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11097127" y3="-2.27355622" z3="0.34998774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83951935" y3="-0.70580041" z3="0.59017668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68761208" y3="-0.23619364" z3="-0.9979055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52991687" y3="0.46411198" z3="1.19422431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09669174" y3="-1.03800191" z3="1.93704055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39560602" y3="-4.3729444" z3="-0.31473025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10851535" y3="-4.59602581" z3="0.89225558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98858633" y3="0.06049127" z3="-1.79055879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35775095" y3="0.62688841" z3="-0.81621713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30611911" y3="-1.07014986" z3="-1.38901926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63863319" y3="0.57332552" z3="0.54658369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16737432" y3="0.14743618" z3="2.18949967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99914895" y3="1.45774991" z3="1.30560576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5597251" y3="-0.09227153" z3="2.26510141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90277639" y3="-1.7085912" z3="1.59788738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61447055" y3="-1.4920165" z3="2.81874178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04459653" y3="-4.01450602" z3="0.90501845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49516323" y3="-4.33087618" z3="1.76606974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33881379" y3="-5.66884701" z3="0.90039132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27437662" y3="-2.20011136" z3="-0.18790795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13594669" y3="-3.30381712" z3="-1.04196448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49913885" y3="-4.46376731" z3="-0.61709081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00425257" y3="-4.51451958" z3="0.68051499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14883006" y3="-3.44982169" z3="1.56502533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77770064" y3="-2.2931712" z3="1.12218351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49024356" y3="-3.23743303" z3="-2.07390414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36180926" y3="-5.30945079" z3="-1.29148055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27227094" y3="-5.70346321" z3="1.11898372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74413702" y3="-3.52676176" z3="2.57525127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8686421" y3="-1.44144188" z3="1.79759584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49685205" y3="4.02924698" z3="0.06228223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86862536" y3="3.82358047" z3="-0.00371938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40794267" y3="3.30893065" z3="-1.17758646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61726303" y3="3.02560404" z3="-2.28861235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24611564" y3="3.22996572" z3="-2.20331787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05119969" y3="4.38839683" z3="0.99314065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51749417" y3="4.03383565" z3="0.84697478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84454818" y3="3.02686027" z3="-1.23741821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07801418" y3="2.63622601" z3="-3.19775604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3872713" y3="2.98405602" z3="-3.05724134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18200169" y3="-5.9092279" z3="2.30828469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77893682" y3="-6.41181643" z3="0.26032043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32651442" y3="2.75567704" z3="-2.31493249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47254814" y3="3.05913227" z3="-0.19467774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60235735" y3="0.16427319" z3="-2.05618391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93132224" y3="1.41224228" z3="-1.90411475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77390127" y3="0.09442364" z3="-2.85972886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24735126" y3="1.20447178" z3="-3.51414814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28555722" y3="-0.8679585" z3="-2.95781066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.14557297" y3="1.1383063" z3="-4.13435436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43057867" y3="2.53644041" z3="-2.61978291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55697063" y3="2.43521826" z3="-3.40049953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90264816" y3="3.48980917" z3="-2.55147167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91932889" y3="3.31218943" z3="-3.94432941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57707624" y3="3.89687117" z3="-0.23721328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7605988" y3="5.04634882" z3="-0.02603852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92857167" y3="3.9429332" z3="0.20714194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44902189" y3="5.07996065" z3="0.77705018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55689155" y3="3.05685594" z3="0.09863361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49004033" y3="5.08935166" z3="1.11220873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33177513" y3="6.21288229" z3="0.5536753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64841763" y3="6.2357463" z3="0.94156431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69561219" y3="7.09168124" z3="0.69731019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07608549" y3="7.13636838" z3="1.39079186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34694861" y3="-3.96053147" z3="-2.86520884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53189626" y3="-4.99147992" z3="-2.5256328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21746934" y3="-3.64345543" z3="-3.47060868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46985574" y3="-3.96484445" z3="-3.53176617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69472935" y3="-1.61459802" z3="-2.1128215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43161751" y3="-1.14940176" z3="-2.79201763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53159362" y3="-0.94336726" z3="-1.25545072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74576176" y3="-1.6619885" z3="-2.66906184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9069,-.9577,-.7031;6.5819,-1.9517,-1.5882;6.066,-.9976,-1.4432;4.7642,1.4761,-1.0753;4.2781,.3081,-.5135;2.6478,2.7417,-1.1448;3.9984,2.7342,-.8447;2.3784,4.9903,-.3429;1.8039,3.8557,-.8656;1.7549,5.8653,-.1343;2.0787,1.6202,-1.6754;3.1218,.3548,.2104;1.704,.3883,-.6406;.6049,.7375,.2939;1.6467,-.8492,-1.5082;1.0937,-2.4721,-1.3217;2.0642,-5.5185,-6.247;1.7884,-5.0785,-5.2844;1.067,-3.9241,-2.8402;1.7521,-3.6973,-5.1457;1.4921,-5.8991,-4.1931;1.1459,-5.3158,-2.9809;1.4002,-3.0882,-3.9304;1.99,-3.0347,-5.9814;1.5445,-6.9873,-4.2798;.9536,-5.9442,-2.1072;.6574,-3.369,-1.6009;-.3396,-3.8529,-.8525;-.6797,-4.8574,-1.1168;-.3767,-3.5434,.5941;-.3993,-3.0571,3.3506;-.6732,-4.5765,1.4916;-.1122,-2.2625,1.0881;-.12,-2.0216,2.4576;-.676,-4.3353,2.8643;-.8598,-5.5869,1.1168;.0874,-1.4241,.4197;.102,-1.0111,2.8109;-.8729,-5.158,3.5566;-.3945,-2.8716,4.4286;1.3518,-1.7524,-3.9095;1.4727,-1.3395,-3.0087;.3331,3.7218,-1.0244;-2.132,-2.9976,-1.7143;-2.9165,-3.1622,-.5696;-3.111,-2.2736,.35;-3.8395,-.7058,.5902;-4.6876,-.2362,-.9979;-2.5299,.4641,1.1942;-5.0967,-1.038,1.937;-3.3956,-4.3729,-.3147;-4.1085,-4.596,.8923;-3.9886,.0605,-1.7906;-5.3578,.6269,-.8162;-5.3061,-1.0701,-1.389;-1.6386,.5733,.5466;-2.1674,.1474,2.1895;-2.9991,1.4577,1.3056;-5.5597,-.0923,2.2651;-5.9028,-1.7086,1.5979;-4.6145,-1.492,2.8187;-5.0446,-4.0145,.905;-3.4952,-4.3309,1.7661;-4.3388,-5.6688,.9004;4.2744,-2.2001,-.1879;4.1359,-3.3038,-1.042;3.4991,-4.4638,-.6171;3.0043,-4.5145,.6805;3.1488,-3.4498,1.565;3.7777,-2.2932,1.1222;4.4902,-3.2374,-2.0739;3.3618,-5.3095,-1.2915;2.2723,-5.7035,1.119;2.7441,-3.5268,2.5753;3.8686,-1.4414,1.7976;-.4969,4.0292,.0623;-1.8686,3.8236,-.0037;-2.4079,3.3089,-1.1776;-1.6173,3.0256,-2.2886;-.2461,3.23,-2.2033;-.0512,4.3884,.9931;-2.5175,4.0338,.847;-3.8445,3.0269,-1.2374;-2.078,2.6362,-3.1978;.3873,2.9841,-3.0572;2.182,-5.9092,2.3083;1.7789,-6.4118,.2603;-4.3265,2.7557,-2.3149;-4.4725,3.0591,-.1947;6.6024,.1643,-2.0562;5.9313,1.4122,-1.9041;7.7739,.0944,-2.8597;8.2474,1.2045,-3.5141;8.2856,-.868,-2.9578;9.1456,1.1383,-4.1344;6.4306,2.5364,-2.6198;7.557,2.4352,-3.4005;5.9026,3.4898,-2.5515;7.9193,3.3122,-3.9443;4.5771,3.8969,-.2372;3.7606,5.0463,-.026;5.9286,3.9429,.2071;6.449,5.08,.7771;6.5569,3.0569,.0986;7.49,5.0894,1.1122;4.3318,6.2129,.5537;5.6484,6.2357,.9416;3.6956,7.0917,.6973;6.0761,7.1364,1.3908;-2.3469,-3.9605,-2.8652;-2.5319,-4.9915,-2.5256;-3.2175,-3.6435,-3.4706;-1.4699,-3.9648,-3.5318;-1.6947,-1.6146,-2.1128;-2.4316,-1.1494,-2.792;-1.5316,-.9434,-1.2555;-.7458,-1.662,-2.6691;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662839230356</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007203033072 0.000890261398 0.025864440616 0.005337327632</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044963715 -0.004432298 0.000137442 0.000218434 0.000274356 0.000333157 0.000365462 0.000418645 0.000493874 0.000621358 0.000660922 0.000785176 0.000803975 0.001046253 0.001107195 0.001165498 0.001247322 0.001287182 0.001305184 0.001439299 0.001486883 0.001654771 0.001754348 0.001900892 0.002182786 0.002477774 0.002608303 0.002915067 0.003287878 0.003411724 0.003958272 0.004285490 0.004611129 0.004656778 0.004974372 0.005588671 0.005686309 0.006084576 0.006259637 0.006768864 0.007386947 0.007541278 0.008128090 0.008767293 0.009180312 0.009877453 0.010070068 0.010278490 0.011410630 0.011871175 0.012811308 0.013053385 0.013920693 0.014378684 0.014856693 0.014918646 0.015328023 0.015634963 0.016062752 0.016394309 0.017376698 0.017877497 0.018601479 0.018925557 0.020370014 0.021070559 0.022052694 0.022221194 0.023039175 0.023396526 0.024573600 0.025950717 0.026271966 0.026671142 0.027148116 0.027773579 0.029093839 0.029827483 0.030425339 0.031768890 0.032348016 0.032752945 0.036506363 0.038229563 0.039349111 0.040321064 0.040993086 0.041669234 0.043352300 0.045258032 0.046150857 0.048390642 0.049669388 0.050678552 0.051363985 0.051568258 0.051807597 0.052281691 0.052387945 0.052563909 0.053626369 0.053948652 0.054739251 0.056493327 0.056833970 0.056944377 0.057224402 0.057725555 0.058547084 0.059219803 0.060405499 0.060479197 0.060756502 0.061495079 0.062313238 0.063194129 0.063839732 0.064602337 0.065178044 0.065925951 0.067904508 0.068536551 0.070172283 0.071864720 0.072663551 0.073136816 0.076488897 0.078391709 0.080639903 0.082272744 0.085365254 0.087314038 0.089483636 0.090840972 0.092841856 0.093389105 0.094216561 0.095263430 0.095543231 0.096477753 0.096976963 0.097437913 0.099440680 0.099777476 0.101225021 0.102539268 0.102780209 0.103663929 0.104043673 0.106917300 0.106999307 0.108656470 0.110077496 0.110271541 0.110976834 0.112535256 0.113660674 0.114372562 0.116240209 0.116539957 0.117358903 0.121351654 0.123076472 0.126494412 0.127591065 0.128805701 0.131283764 0.133103320 0.134698670 0.136703950 0.138852355 0.142120992 0.144529036 0.145626507 0.146541663 0.146851885 0.152517218 0.157303176 0.165034905 0.170495034 0.174249251 0.176200406 0.180018913 0.180534916 0.183237102 0.185599760 0.187195099 0.188541738 0.195068298 0.198595509 0.201816567 0.205103487 0.205392240 0.206796796 0.207159404 0.209076867 0.210896011 0.212823995 0.215638356 0.220499241 0.223364501 0.224835842 0.231521242 0.232709053 0.233709289 0.235135315 0.244507770 0.249174242 0.254577081 0.255342780 0.256708685 0.258815917 0.271371917 0.277658565 0.290036338 0.296235985 0.298266826 0.299475682 0.304283408 0.306220260 0.307544875 0.317101566 0.320582163 0.322786148 0.327198869 0.328933040 0.345995453 0.350618560 0.353819702 0.354750922 0.359195017 0.363852490 0.381659615 0.385523737 0.405579588 0.409439657 0.415192085 0.430099354 0.430814660 0.445099634 0.463837585 0.463961599 0.477881215 0.478087418 0.483606149 0.490120618 0.498026922 0.510769043 0.542516490 0.565086993 0.566775201 0.582855973 0.583748680 0.604401831 0.635030156 0.643893354 0.662743298 0.665853870 0.672239080 0.681392619 0.691620554 0.698449183 0.704236636 0.705020652 0.705763140 0.714624395 0.732882134 0.737351255 0.750680487 0.771577321 0.775843398 0.801359548 0.816765935 0.819860129 0.820640725 0.831186714 0.839859774 0.840960012 0.845702110 0.846037072 0.849001460 0.851449419 0.858277954 0.862855146 0.867343786 0.872233306 0.873211549 0.875942133 0.889148776 0.890171906 0.893779856 0.916561079 0.918999197 0.923334783 0.923975512 0.931466756 0.938158922 0.958446975 0.961707954 0.969454644 0.975856560 0.989235763 0.999617645 1.013037549 1.034039911 1.042618584 1.049265466 1.055254101 1.075025222 1.084195169 1.088667157 1.109991328 1.110586544 1.116265017 1.122412333 1.123319341 1.134136001 1.142798838 1.161219629 1.168755611 1.172622313 1.173246131 1.200409416 1.204303388 1.216179486 1.247296373 1.293611795 1.295708141 1.312638846 1.316300900 1.326280395 1.326905816 1.330137519 1.334484271 1.340964184 1.345858212 1.362222878 1.378766510 1.380772909 1.381151474 1.382523617 1.445376297 1.557475634 1.671852721 1.816165474</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">69</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90498262" y3="-0.95781647" z3="-0.70466166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57804791" y3="-1.95236464" z3="-1.59291863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06252638" y3="-0.99814696" z3="-1.44730468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76198113" y3="1.47583533" z3="-1.07771333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27686202" y3="0.30821087" z3="-0.51440789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64597051" y3="2.74251051" z3="-1.14242324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99729473" y3="2.73431336" z3="-0.84544812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.379516" y3="4.99111933" z3="-0.33919099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80335296" y3="3.85688907" z3="-0.86113831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.756781" y3="5.86621298" z3="-0.12875086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07496128" y3="1.62136636" z3="-1.67164698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12205875" y3="0.35562154" z3="0.21190379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70247167" y3="0.3891947" z3="-0.63620893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60540227" y3="0.73822691" z3="0.3007733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64334039" y3="-0.84811306" z3="-1.50395194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09380254" y3="-2.47244735" z3="-1.31892138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.07843061" y3="-5.51989433" z3="-6.24055153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79957489" y3="-5.07986278" z3="-5.27882997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07094242" y3="-3.92502313" z3="-2.83682894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76299704" y3="-3.69864293" z3="-5.140277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49943809" y3="-5.90028429" z3="-4.18849355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14974984" y3="-5.3167727" z3="-2.97734604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40736036" y3="-3.08935949" z3="-3.92621995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00372105" y3="-3.03611495" z3="-5.97531191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5518571" y3="-6.9885041" z3="-4.27483939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95495701" y3="-5.94519272" z3="-2.10417206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65901843" y3="-3.36999968" z3="-1.59838916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33994251" y3="-3.85351834" z3="-0.85168254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67822242" y3="-4.85887125" z3="-1.11583389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37766621" y3="-3.54474343" z3="0.59524721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40134894" y3="-3.05785718" z3="3.35182661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67348268" y3="-4.57831667" z3="1.49299703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11529226" y3="-2.26264434" z3="1.08882577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12358418" y3="-2.02144604" z3="2.45836198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67657747" y3="-4.33700568" z3="2.86582579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85921774" y3="-5.58948012" z3="1.11842141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08323546" y3="-1.42368821" z3="0.42022852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09659269" y3="-1.00966932" z3="2.81101894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8728731" y3="-5.16010099" z3="3.5584799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39685954" y3="-2.87234871" z3="4.42994165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35901347" y3="-1.75351167" z3="-3.90579994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47588063" y3="-1.34012877" z3="-3.00473447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33211816" y3="3.72400198" z3="-1.01697373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12919141" y3="-3.00066266" z3="-1.71509573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91626987" y3="-3.16235996" z3="-0.57039816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11050294" y3="-2.27546706" z3="0.34893839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.840099" y3="-0.70657524" z3="0.58783054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68284426" y3="-0.23565007" z3="-1.01180444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53512367" y3="0.46010021" z3="1.19172839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10119788" y3="-1.03814491" z3="1.92561539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.3987547" y3="-4.3692667" z3="-0.31905992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10955356" y3="-4.59454832" z3="0.88930921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.969605" y3="0.0747528" z3="-1.79691333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34998153" y3="0.62296015" z3="-0.82503939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29646397" y3="-1.06387801" z3="-1.39660705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64952671" y3="0.57419516" z3="0.54242709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16908055" y3="0.13739031" z3="2.18118518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00200079" y3="1.45607039" z3="1.3105514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57401689" y3="-0.08459814" z3="2.23923697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91044645" y3="-1.70589252" z3="1.57268957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.62828353" y3="-1.4955819" z3="2.81450624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04685699" y3="-4.01430823" z3="0.90232961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49427137" y3="-4.32715411" z3="1.76280657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33827751" y3="-5.66888935" z3="0.89990086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27350065" y3="-2.19999235" z3="-0.18771123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13558645" y3="-3.30482125" z3="-1.0404353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49955073" y3="-4.46466591" z3="-0.61413845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00455975" y3="-4.51408785" z3="0.68345768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14884849" y3="-3.44834396" z3="1.56679323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77726774" y3="-2.29194607" z3="1.12266512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48960366" y3="-3.23952542" z3="-2.07254743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36281257" y3="-5.31125338" z3="-1.28752508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27295173" y3="-5.70284919" z3="1.12319637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74444609" y3="-3.52436855" z3="2.5772037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86816228" y3="-1.43961747" z3="1.79730376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49504195" y3="4.02798873" z3="0.07310276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86710652" y3="3.8236723" z3="0.00945062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40979096" y3="3.31439085" z3="-1.16594672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62181437" y3="3.03426656" z3="-2.27969525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25020466" y3="3.2368208" z3="-2.1964909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04683717" y3="4.38347903" z3="1.00438712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51367768" y3="4.0312382" z3="0.86300246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84646245" y3="3.03368348" z3="-1.22302508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08433899" y3="2.64789078" z3="-3.18858617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38097802" y3="2.99342917" z3="-3.05287374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18303425" y3="-5.90766883" z3="2.31281718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77961623" y3="-6.41204102" z3="0.26523563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33217368" y3="2.76973144" z3="-2.30205117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47253203" y3="3.06282107" z3="-0.18054035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59754261" y3="0.16325088" z3="-2.06228292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92714726" y3="1.41143077" z3="-1.90920761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76697148" y3="0.09271355" z3="-2.86883803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23891031" y3="1.20230014" z3="-3.52513148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27812976" y3="-0.86984422" z3="-2.96778426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.13541626" y3="1.13557618" z3="-4.1477509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4248682" y3="2.53519211" z3="-2.62661634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54916801" y3="2.43329056" z3="-3.41025379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89735253" y3="3.48872379" z3="-2.55734337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91031788" y3="3.30989082" z3="-3.95548488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57792245" y3="3.89659219" z3="-0.23902456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76246189" y3="5.04638151" z3="-0.02547173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93050177" y3="3.94185172" z3="0.20219574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45276871" y3="5.07836322" z3="0.77148753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55820153" y3="3.05554229" z3="0.09183462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49456994" y3="5.08709854" z3="1.10428571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33550193" y3="6.2123869" z3="0.55350645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65304838" y3="6.23444036" z3="0.93842985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70007143" y3="7.09143168" z3="0.6990297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08214548" y3="7.1346314" z3="1.38717592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34354584" y3="-3.96466586" z3="-2.86525862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52844718" y3="-4.99510845" z3="-2.52542245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21307245" y3="-3.64893531" z3="-3.47272033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46553052" y3="-3.96979414" z3="-3.53062724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69267659" y3="-1.61726218" z3="-2.11634976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42885527" y3="-1.15270545" z3="-2.79713451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52977228" y3="-0.94448514" z3="-1.25963033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74221635" y3="-1.66597701" z3="-2.67171871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.905,-.9578,-.7047;6.578,-1.9524,-1.5929;6.0625,-.9981,-1.4473;4.762,1.4758,-1.0777;4.2769,.3082,-.5144;2.646,2.7425,-1.1424;3.9973,2.7343,-.8454;2.3795,4.9911,-.3392;1.8034,3.8569,-.8611;1.7568,5.8662,-.1288;2.075,1.6214,-1.6716;3.1221,.3556,.2119;1.7025,.3892,-.6362;.6054,.7382,.3008;1.6433,-.8481,-1.504;1.0938,-2.4724,-1.3189;2.0784,-5.5199,-6.2406;1.7996,-5.0799,-5.2788;1.0709,-3.925,-2.8368;1.763,-3.6986,-5.1403;1.4994,-5.9003,-4.1885;1.1497,-5.3168,-2.9773;1.4074,-3.0894,-3.9262;2.0037,-3.0361,-5.9753;1.5519,-6.9885,-4.2748;.955,-5.9452,-2.1042;.659,-3.37,-1.5984;-.3399,-3.8535,-.8517;-.6782,-4.8589,-1.1158;-.3777,-3.5447,.5952;-.4013,-3.0579,3.3518;-.6735,-4.5783,1.493;-.1153,-2.2626,1.0888;-.1236,-2.0214,2.4584;-.6766,-4.337,2.8658;-.8592,-5.5895,1.1184;.0832,-1.4237,.4202;.0966,-1.0097,2.811;-.8729,-5.1601,3.5585;-.3969,-2.8723,4.4299;1.359,-1.7535,-3.9058;1.4759,-1.3401,-3.0047;.3321,3.724,-1.017;-2.1292,-3.0007,-1.7151;-2.9163,-3.1624,-.5704;-3.1105,-2.2755,.3489;-3.8401,-.7066,.5878;-4.6828,-.2357,-1.0118;-2.5351,.4601,1.1917;-5.1012,-1.0381,1.9256;-3.3988,-4.3693,-.3191;-4.1096,-4.5945,.8893;-3.9696,.0748,-1.7969;-5.35,.623,-.825;-5.2965,-1.0639,-1.3966;-1.6495,.5742,.5424;-2.1691,.1374,2.1812;-3.002,1.4561,1.3106;-5.574,-.0846,2.2392;-5.9104,-1.7059,1.5727;-4.6283,-1.4956,2.8145;-5.0469,-4.0143,.9023;-3.4943,-4.3272,1.7628;-4.3383,-5.6689,.8999;4.2735,-2.2,-.1877;4.1356,-3.3048,-1.0404;3.4996,-4.4647,-.6141;3.0046,-4.5141,.6835;3.1488,-3.4483,1.5668;3.7773,-2.2919,1.1227;4.4896,-3.2395,-2.0725;3.3628,-5.3113,-1.2875;2.273,-5.7028,1.1232;2.7444,-3.5244,2.5772;3.8682,-1.4396,1.7973;-.495,4.028,.0731;-1.8671,3.8237,.0095;-2.4098,3.3144,-1.1659;-1.6218,3.0343,-2.2797;-.2502,3.2368,-2.1965;-.0468,4.3835,1.0044;-2.5137,4.0312,.863;-3.8465,3.0337,-1.223;-2.0843,2.6479,-3.1886;.381,2.9934,-3.0529;2.183,-5.9077,2.3128;1.7796,-6.412,.2652;-4.3322,2.7697,-2.3021;-4.4725,3.0628,-.1805;6.5975,.1633,-2.0623;5.9271,1.4114,-1.9092;7.767,.0927,-2.8688;8.2389,1.2023,-3.5251;8.2781,-.8698,-2.9678;9.1354,1.1356,-4.1478;6.4249,2.5352,-2.6266;7.5492,2.4333,-3.4103;5.8974,3.4887,-2.5573;7.9103,3.3099,-3.9555;4.5779,3.8966,-.239;3.7625,5.0464,-.0255;5.9305,3.9419,.2022;6.4528,5.0784,.7715;6.5582,3.0555,.0918;7.4946,5.0871,1.1043;4.3355,6.2124,.5535;5.653,6.2344,.9384;3.7001,7.0914,.699;6.0821,7.1346,1.3872;-2.3435,-3.9647,-2.8653;-2.5284,-4.9951,-2.5254;-3.2131,-3.6489,-3.4727;-1.4655,-3.9698,-3.5306;-1.6927,-1.6173,-2.1163;-2.4289,-1.1527,-2.7971;-1.5298,-.9445,-1.2596;-.7422,-1.666,-2.6717;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662830321868</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009030142869 0.000920386158 0.032913796353 0.005338206894</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.044983788 -0.005060505 0.000137087 0.000217863 0.000274270 0.000333223 0.000366396 0.000418699 0.000494249 0.000623452 0.000663269 0.000784769 0.000804052 0.001049061 0.001112165 0.001171261 0.001249465 0.001289243 0.001312189 0.001442942 0.001490151 0.001704841 0.001758292 0.001918470 0.002183554 0.002493912 0.002647023 0.002961057 0.003290747 0.003510370 0.003958155 0.004286443 0.004621109 0.004661225 0.004976465 0.005588934 0.005691784 0.006112639 0.006297724 0.006769689 0.007387027 0.007542353 0.008126576 0.008769880 0.009182683 0.009884112 0.010074777 0.010282339 0.011428608 0.011943620 0.012815184 0.013053785 0.013918003 0.014378158 0.014856921 0.014910721 0.015331123 0.015635217 0.016062678 0.016394519 0.017411165 0.017915227 0.018657381 0.018960204 0.020370538 0.021149619 0.022189397 0.022246831 0.023039137 0.023396432 0.024573499 0.025950878 0.026275056 0.026672410 0.027155372 0.027773882 0.029141161 0.029828674 0.030425488 0.031770381 0.032347955 0.032753373 0.036506994 0.038232334 0.039349492 0.040336595 0.040996522 0.042093992 0.043354454 0.045258452 0.046152604 0.048386389 0.049669405 0.050683766 0.051364607 0.051568521 0.051808229 0.052281702 0.052387928 0.052565339 0.053767107 0.054240681 0.054743839 0.056493307 0.056834910 0.056949807 0.057224377 0.057728734 0.058549801 0.059219839 0.060415649 0.060486668 0.060872891 0.061546661 0.062338955 0.063205173 0.063850518 0.064602536 0.065182509 0.065937168 0.067903371 0.068539559 0.070247684 0.071871640 0.072663511 0.073449533 0.076490425 0.078391707 0.080640749 0.082272728 0.085580699 0.087317981 0.089484445 0.090841780 0.092841845 0.093395008 0.094219855 0.095263636 0.095564888 0.096479790 0.097025340 0.097480262 0.099440804 0.099820038 0.101224962 0.102540068 0.102780469 0.103682145 0.104042561 0.106938482 0.107311699 0.108756044 0.110234362 0.110314729 0.110985467 0.112549939 0.113864512 0.115698655 0.116435091 0.116788238 0.117362882 0.121355542 0.123079331 0.126503145 0.127655484 0.128806242 0.131322966 0.133159504 0.134799862 0.136777315 0.139234332 0.142120876 0.144534475 0.145714458 0.146776847 0.147486775 0.152517815 0.157308980 0.165199885 0.170495524 0.174317686 0.176202999 0.180517499 0.182936336 0.183495023 0.185644452 0.187209761 0.188565579 0.195209236 0.198606317 0.201817092 0.205104734 0.205392162 0.206797877 0.207159467 0.209077067 0.210895855 0.212823954 0.215638319 0.220514606 0.224226389 0.224846251 0.231521241 0.232709698 0.233710226 0.235135805 0.244508865 0.249182525 0.254576856 0.255342729 0.256708693 0.258815906 0.271372695 0.277658532 0.290036330 0.296236010 0.298266680 0.299476049 0.304283643 0.306220288 0.307545046 0.317118459 0.320582174 0.322786150 0.327222422 0.328933019 0.345995888 0.350618546 0.353828715 0.354750989 0.359195903 0.363852478 0.381666413 0.385743872 0.405582625 0.409451149 0.415326608 0.430100926 0.430854973 0.445118984 0.463837027 0.463961430 0.477881380 0.478089588 0.483607166 0.490132376 0.498026928 0.510768906 0.542516855 0.565087019 0.566775207 0.582856010 0.583748960 0.604401850 0.635248053 0.643893598 0.662737978 0.665852724 0.672241288 0.681392970 0.691660360 0.698668003 0.704240880 0.705283149 0.712398496 0.714755530 0.732935690 0.737353764 0.750680488 0.771577345 0.775843482 0.801392604 0.816767210 0.819863321 0.820641337 0.831193959 0.839947795 0.841001159 0.845983161 0.847710139 0.849331612 0.852583798 0.858279250 0.863325268 0.867343787 0.872253606 0.875747697 0.876323161 0.889171223 0.890210067 0.893784447 0.916755049 0.919050314 0.923827146 0.924326576 0.931499882 0.938158719 0.958447329 0.961726580 0.969464554 0.975865833 0.989242500 0.999618793 1.013038294 1.034044547 1.042618695 1.049277904 1.055254104 1.075182998 1.084197888 1.088667182 1.109991565 1.110586664 1.116276624 1.122412359 1.123319458 1.134142708 1.142825947 1.161220973 1.168756368 1.172622473 1.173247441 1.200409501 1.204307910 1.216184669 1.247296455 1.293760460 1.295708388 1.312640481 1.316303603 1.326280353 1.326906266 1.330137528 1.334488138 1.340965304 1.345895087 1.362243758 1.378766549 1.380772977 1.381151745 1.382523554 1.445387673 1.557475691 1.671853873 1.816417439</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">70</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90319146" y3="-0.95784218" z3="-0.70598384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57448387" y3="-1.95294619" z3="-1.59701892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05923711" y3="-0.99865157" z3="-1.45096351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75980681" y3="1.47567397" z3="-1.07997976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27561138" y3="0.30839112" z3="-0.51515977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64414191" y3="2.74328728" z3="-1.13994122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99616162" y3="2.73450591" z3="-0.84619251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38063656" y3="4.9920497" z3="-0.33620823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80275144" y3="3.85811726" z3="-0.85673102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75875571" y3="5.86735399" z3="-0.12450265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07143955" y3="1.6223589" z3="-1.66779575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12233495" y3="0.35641674" z3="0.21349209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7009153" y3="0.39028179" z3="-0.63161323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60586124" y3="0.73932447" z3="0.30762707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63973871" y3="-0.84708292" z3="-1.49925615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09455324" y3="-2.47292242" z3="-1.31567115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.09150527" y3="-5.52044521" z3="-6.23458355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.80990897" y3="-5.08049425" z3="-5.27363833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07487362" y3="-3.92584451" z3="-2.83356398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77306484" y3="-3.69932452" z3="-5.13506388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50649981" y3="-5.90101799" z3="-4.1842787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15362628" y3="-5.31759325" z3="-2.97405354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41415133" y3="-3.09007687" z3="-3.92193595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01622494" y3="-3.03673268" z3="-5.96932321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55892011" y3="-6.98922242" z3="-4.27061634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.956521" y3="-5.94617935" z3="-2.10155172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66060266" y3="-3.37066766" z3="-1.59585473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33796203" y3="-3.8550634" z3="-0.85004904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67627656" y3="-4.86027771" z3="-1.11447831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37867502" y3="-3.54501525" z3="0.5964559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40506221" y3="-3.05858087" z3="3.35280525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67492364" y3="-4.57848498" z3="1.49364959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11668076" y3="-2.26396009" z3="1.09070544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12629812" y3="-2.02288794" z3="2.46015348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67939063" y3="-4.33718002" z3="2.86628565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85908408" y3="-5.58981738" z3="1.11902776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08342974" y3="-1.42589536" z3="0.42299575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.093728" y3="-1.01208036" z3="2.81341423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8756228" y3="-5.16030346" z3="3.5583248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40103099" y3="-2.87322619" z3="4.43089467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36596071" y3="-1.75433233" z3="-3.90172555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4788715" y3="-1.34052881" z3="-3.00036279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33114336" y3="3.72613942" z3="-1.00969053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1289234" y3="-3.00194064" z3="-1.71774198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91623389" y3="-3.16287646" z3="-0.57416772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11213586" y3="-2.27174156" z3="0.34265314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83977977" y3="-0.70569117" z3="0.58048461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66941362" y3="-0.2280437" z3="-1.0208129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53531061" y3="0.45855895" z3="1.19414683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11944941" y3="-1.03773025" z3="1.91116855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39705707" y3="-4.37195886" z3="-0.31854885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11011878" y3="-4.59406331" z3="0.88842952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.96255378" y3="0.08459676" z3="-1.80072604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35227987" y3="0.62451556" z3="-0.83833059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.27680358" y3="-1.0639204" z3="-1.42952085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64844738" y3="0.57108617" z3="0.54367035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16925854" y3="0.13025332" z3="2.18174553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00361705" y3="1.45383897" z3="1.31570777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57250259" y3="-0.08900775" z3="2.23364445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92661031" y3="-1.70057028" z3="1.56514735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.65165561" y3="-1.50322666" z3="2.79518261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04822559" y3="-4.01493924" z3="0.89875223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49640776" y3="-4.32358044" z3="1.7619549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33695056" y3="-5.66872881" z3="0.90027977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27268293" y3="-2.19981491" z3="-0.18733165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13522661" y3="-3.30566578" z3="-1.03880946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50000978" y3="-4.46544567" z3="-0.6111327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0050214" y3="-4.51374272" z3="0.68648968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14899012" y3="-3.44702741" z3="1.56870508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77688637" y3="-2.29081324" z3="1.12331238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48885558" y3="-3.24131003" z3="-2.07111029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3636355" y3="-5.31271922" z3="-1.28363767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2734736" y3="-5.70208872" z3="1.12720767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74467898" y3="-3.52209359" z3="2.57923192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86757137" y3="-1.4378462" z3="1.79716894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49370025" y3="4.02727003" z3="0.08236817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86604021" y3="3.82398228" z3="0.02086969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41092104" y3="3.31827743" z3="-1.15391845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6253148" y3="3.04120985" z3="-2.26986911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25351517" y3="3.24266291" z3="-2.18904699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04345812" y3="4.37943893" z3="1.01366862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51072765" y3="4.02910147" z3="0.87612115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84831508" y3="3.04007664" z3="-1.20991302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09034163" y3="2.6588249" z3="-3.17940141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37573777" y3="3.00194352" z3="-3.04741418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1833578" y3="-5.9057861" z3="2.31688551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7801766" y3="-6.41198663" z3="0.26979248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3369735" y3="2.78454867" z3="-2.29031527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47164736" y3="3.0627799" z3="-0.16486257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5929725" y3="0.16228263" z3="-2.0678836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92308484" y3="1.41063537" z3="-1.91405707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.760468" y3="0.09104575" z3="-2.87716651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23093232" y3="1.2001118" z3="-3.53538717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27123897" y3="-0.87165315" z3="-2.97669612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.12587505" y3="1.13282721" z3="-4.16018537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41928621" y3="2.53387778" z3="-2.63332673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54165096" y3="2.4312778" z3="-3.41964411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89206924" y3="3.487523" z3="-2.56337585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90159536" y3="3.30744289" z3="-3.96636972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5787514" y3="3.89653632" z3="-0.24119411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76434713" y3="5.04667412" z3="-0.0257356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93236373" y3="3.94116363" z3="0.19686506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45647287" y3="5.07736917" z3="0.76500181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55939571" y3="3.05460418" z3="0.08507541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49901581" y3="5.08559374" z3="1.09543246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33928698" y3="6.2123607" z3="0.55189711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65770921" y3="6.23377531" z3="0.93380035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70462605" y3="7.09167834" z3="0.69889087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08825503" y3="7.13370858" z3="1.38160889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34096633" y3="-3.96749843" z3="-2.86652468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52721408" y3="-4.99723095" z3="-2.52539422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20874848" y3="-3.65151391" z3="-3.47527001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46165852" y3="-3.97388979" z3="-3.53008662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69060038" y3="-1.61998615" z3="-2.11986823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42498688" y3="-1.15561665" z3="-2.80315434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52998001" y3="-0.94573691" z3="-1.26322075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73784016" y3="-1.67052475" z3="-2.67229147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9032,-.9578,-.706;6.5745,-1.9529,-1.597;6.0592,-.9987,-1.451;4.7598,1.4757,-1.08;4.2756,.3084,-.5152;2.6441,2.7433,-1.1399;3.9962,2.7345,-.8462;2.3806,4.992,-.3362;1.8028,3.8581,-.8567;1.7588,5.8674,-.1245;2.0714,1.6224,-1.6678;3.1223,.3564,.2135;1.7009,.3903,-.6316;.6059,.7393,.3076;1.6397,-.8471,-1.4993;1.0946,-2.4729,-1.3157;2.0915,-5.5204,-6.2346;1.8099,-5.0805,-5.2736;1.0749,-3.9258,-2.8336;1.7731,-3.6993,-5.1351;1.5065,-5.901,-4.1843;1.1536,-5.3176,-2.9741;1.4142,-3.0901,-3.9219;2.0162,-3.0367,-5.9693;1.5589,-6.9892,-4.2706;.9565,-5.9462,-2.1016;.6606,-3.3707,-1.5959;-.338,-3.8551,-.85;-.6763,-4.8603,-1.1145;-.3787,-3.545,.5965;-.4051,-3.0586,3.3528;-.6749,-4.5785,1.4936;-.1167,-2.264,1.0907;-.1263,-2.0229,2.4602;-.6794,-4.3372,2.8663;-.8591,-5.5898,1.119;.0834,-1.4259,.423;.0937,-1.0121,2.8134;-.8756,-5.1603,3.5583;-.401,-2.8732,4.4309;1.366,-1.7543,-3.9017;1.4789,-1.3405,-3.0004;.3311,3.7261,-1.0097;-2.1289,-3.0019,-1.7177;-2.9162,-3.1629,-.5742;-3.1121,-2.2717,.3427;-3.8398,-.7057,.5805;-4.6694,-.228,-1.0208;-2.5353,.4586,1.1941;-5.1194,-1.0377,1.9112;-3.3971,-4.372,-.3185;-4.1101,-4.5941,.8884;-3.9626,.0846,-1.8007;-5.3523,.6245,-.8383;-5.2768,-1.0639,-1.4295;-1.6484,.5711,.5437;-2.1693,.1303,2.1817;-3.0036,1.4538,1.3157;-5.5725,-.089,2.2336;-5.9266,-1.7006,1.5651;-4.6517,-1.5032,2.7952;-5.0482,-4.0149,.8988;-3.4964,-4.3236,1.762;-4.337,-5.6687,.9003;4.2727,-2.1998,-.1873;4.1352,-3.3057,-1.0388;3.5,-4.4654,-.6111;3.005,-4.5137,.6865;3.149,-3.447,1.5687;3.7769,-2.2908,1.1233;4.4889,-3.2413,-2.0711;3.3636,-5.3127,-1.2836;2.2735,-5.7021,1.1272;2.7447,-3.5221,2.5792;3.8676,-1.4378,1.7972;-.4937,4.0273,.0824;-1.866,3.824,.0209;-2.4109,3.3183,-1.1539;-1.6253,3.0412,-2.2699;-.2535,3.2427,-2.189;-.0435,4.3794,1.0137;-2.5107,4.0291,.8761;-3.8483,3.0401,-1.2099;-2.0903,2.6588,-3.1794;.3757,3.0019,-3.0474;2.1834,-5.9058,2.3169;1.7802,-6.412,.2698;-4.337,2.7845,-2.2903;-4.4716,3.0628,-.1649;6.593,.1623,-2.0679;5.9231,1.4106,-1.9141;7.7605,.091,-2.8772;8.2309,1.2001,-3.5354;8.2712,-.8717,-2.9767;9.1259,1.1328,-4.1602;6.4193,2.5339,-2.6333;7.5417,2.4313,-3.4196;5.8921,3.4875,-2.5634;7.9016,3.3074,-3.9664;4.5788,3.8965,-.2412;3.7643,5.0467,-.0257;5.9324,3.9412,.1969;6.4565,5.0774,.765;6.5594,3.0546,.0851;7.499,5.0856,1.0954;4.3393,6.2124,.5519;5.6577,6.2338,.9338;3.7046,7.0917,.6989;6.0883,7.1337,1.3816;-2.341,-3.9675,-2.8665;-2.5272,-4.9972,-2.5254;-3.2087,-3.6515,-3.4753;-1.4617,-3.9739,-3.5301;-1.6906,-1.62,-2.1199;-2.425,-1.1556,-2.8032;-1.53,-.9457,-1.2632;-.7378,-1.6705,-2.6723;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662806193923</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.010536614739 0.001044499123 0.037027688338 0.005338093083</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045010916 -0.005753598 0.000137721 0.000219022 0.000278485 0.000333472 0.000366909 0.000418642 0.000494669 0.000627574 0.000664736 0.000784692 0.000804918 0.001056079 0.001114136 0.001175066 0.001249458 0.001292986 0.001316580 0.001442764 0.001494477 0.001723095 0.001758323 0.001920681 0.002184832 0.002495958 0.002681481 0.002983122 0.003294374 0.003667004 0.003958244 0.004289034 0.004632486 0.004731783 0.004998944 0.005590051 0.005693750 0.006143621 0.006399915 0.006769576 0.007387216 0.007547781 0.008153992 0.008794598 0.009183052 0.009903792 0.010074981 0.010282153 0.011428738 0.012512458 0.012831029 0.013118186 0.014084552 0.014394868 0.014857858 0.015051055 0.015331430 0.015636779 0.016065564 0.016395246 0.017429126 0.017937193 0.018768717 0.019041849 0.020373992 0.021217368 0.022199152 0.022272408 0.023039252 0.023397755 0.024573971 0.025950821 0.026275090 0.026673045 0.027159722 0.027775323 0.029140788 0.029829620 0.030425523 0.031770636 0.032348147 0.032754066 0.036508169 0.038232510 0.039349435 0.040335536 0.040996704 0.042298188 0.043360514 0.045258450 0.046154614 0.048463492 0.049669405 0.050683170 0.051365247 0.051568870 0.051808616 0.052281707 0.052387933 0.052565325 0.053803339 0.054704531 0.054853944 0.056493293 0.056836917 0.056958094 0.057226885 0.057730181 0.058549858 0.059219789 0.060417261 0.060488519 0.060903973 0.061563573 0.062338255 0.063218420 0.063856962 0.064602489 0.065184268 0.065939087 0.067908934 0.068545582 0.070291210 0.071875866 0.072663464 0.073646983 0.076490190 0.078392185 0.080645426 0.082272812 0.085725791 0.087327497 0.089485136 0.090841563 0.092842329 0.093404003 0.094223203 0.095263973 0.095569048 0.096484662 0.097034847 0.097527356 0.099441622 0.100068734 0.101226730 0.102540016 0.102780502 0.103682081 0.104046481 0.106938053 0.107448111 0.108832232 0.110274065 0.110376212 0.111000417 0.112554156 0.113902876 0.115961797 0.116485727 0.117354910 0.118006504 0.121354900 0.123079141 0.126503333 0.127674245 0.128806738 0.131321693 0.133168790 0.134818025 0.136791548 0.139219231 0.142120906 0.144537620 0.145747822 0.146780680 0.149004885 0.152518351 0.157310458 0.165274140 0.170495421 0.174333739 0.176202914 0.180517399 0.183197760 0.185422240 0.186600247 0.187218187 0.188679532 0.195604254 0.198630995 0.201816973 0.205106763 0.205392314 0.206798525 0.207159550 0.209078107 0.210900512 0.212825732 0.215640468 0.220513455 0.224818488 0.225634004 0.231521227 0.232709920 0.233710249 0.235135997 0.244508800 0.249182999 0.254577519 0.255342722 0.256708739 0.258815957 0.271372871 0.277660098 0.290036446 0.296236403 0.298267593 0.299476456 0.304283810 0.306220800 0.307545092 0.317128024 0.320582164 0.322786288 0.327231911 0.328935276 0.345996246 0.350619359 0.353827926 0.354751003 0.359196197 0.363852726 0.381775333 0.387652274 0.405582332 0.409492977 0.415648309 0.430102405 0.430854988 0.445147593 0.463847801 0.463972368 0.477881394 0.478090379 0.483609016 0.490210326 0.498026929 0.510769022 0.542518630 0.565087497 0.566775216 0.582857344 0.583756397 0.604402157 0.635279018 0.643894138 0.662757799 0.665858849 0.672241220 0.681395115 0.691697505 0.698713531 0.704241303 0.705293439 0.714487168 0.719124388 0.733554878 0.737355247 0.750680512 0.771577565 0.775843577 0.801392488 0.816769548 0.819867798 0.820643205 0.831203391 0.839959262 0.841002159 0.845983170 0.848459736 0.849753303 0.854497085 0.858279402 0.864035230 0.867343838 0.872259758 0.875902985 0.882329249 0.889239724 0.890251749 0.893792911 0.916983327 0.919194090 0.923852307 0.924467976 0.931514133 0.938160496 0.958447437 0.961775497 0.969475417 0.975878301 0.989248831 0.999620111 1.013038527 1.034048747 1.042618745 1.049291505 1.055254198 1.075229468 1.084200604 1.088667258 1.109991689 1.110586669 1.116279095 1.122412392 1.123319645 1.134147137 1.142838861 1.161220949 1.168756406 1.172623846 1.173247562 1.200409579 1.204307861 1.216190507 1.247296525 1.293834220 1.295710094 1.312645145 1.316307867 1.326280310 1.326907083 1.330137541 1.334490281 1.340965443 1.345916062 1.362252102 1.378766486 1.380773110 1.381152050 1.382523512 1.445707982 1.557475689 1.671853962 1.816511791</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">71</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90134707" y3="-0.95778399" z3="-0.70687482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57093072" y3="-1.95355213" z3="-1.60039678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0559944" y3="-0.9991405" z3="-1.45403105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75772945" y3="1.4755273" z3="-1.08207249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27434781" y3="0.3087006" z3="-0.51561345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64249107" y3="2.74403039" z3="-1.13772858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99514801" y3="2.73472839" z3="-0.84706837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38179747" y3="4.99314797" z3="-0.3338724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8023489" y3="3.85929728" z3="-0.85282129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76072111" y3="5.86877098" z3="-0.12080833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06788908" y3="1.62341805" z3="-1.66414623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12249842" y3="0.35760358" z3="0.21524509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69950976" y3="0.39127661" z3="-0.62719401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6060103" y3="0.74000911" z3="0.31396634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63690729" y3="-0.84604754" z3="-1.49468618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0950533" y3="-2.47297227" z3="-1.31302685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.10367263" y3="-5.52050189" z3="-6.22922506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.81963124" y3="-5.08069739" z3="-5.26893653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07870118" y3="-3.92638626" z3="-2.83048718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.78253491" y3="-3.69954405" z3="-5.13022155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.51329507" y3="-5.90140149" z3="-4.1805138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15751545" y3="-5.31814344" z3="-2.97106768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4205611" y3="-3.09044676" z3="-3.91791769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02783668" y3="-3.03680674" z3="-5.96374145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56578303" y3="-6.98960562" z3="-4.26692278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95830073" y3="-5.94689266" z3="-2.09914089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66245747" y3="-3.37127046" z3="-1.5935569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33721701" y3="-3.85579302" z3="-0.84896383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67450309" y3="-4.86130447" z3="-1.11355722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37907116" y3="-3.54624258" z3="0.59757972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40808497" y3="-3.0600564" z3="3.35401793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67659591" y3="-4.57944086" z3="1.49433287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11713454" y3="-2.26517097" z3="1.09223732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12793241" y3="-2.02442599" z3="2.46171652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68261174" y3="-4.33832019" z3="2.86694541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86149257" y3="-5.5897173" z3="1.11883247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08328363" y3="-1.42675791" z3="0.42427282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09221537" y3="-1.01366538" z3="2.81535365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88058841" y3="-5.16094787" z3="3.55856627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40585587" y3="-2.87453765" z3="4.43201755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3724047" y3="-1.75472835" z3="-3.89770233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48121757" y3="-1.34071537" z3="-2.99593857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33036128" y3="3.72782868" z3="-1.00271606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12613731" y3="-3.00464074" z3="-1.71936768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91462617" y3="-3.16559619" z3="-0.57652565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11227398" y3="-2.27476336" z3="0.3391872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84406009" y3="-0.70598195" z3="0.57056477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66763129" y3="-0.22716547" z3="-1.03361039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53715685" y3="0.45514068" z3="1.19827946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.12101782" y3="-1.03754694" z3="1.89504704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39467197" y3="-4.37423505" z3="-0.32027575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10991486" y3="-4.59423755" z3="0.88608661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.9499023" y3="0.09347192" z3="-1.80782918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3434083" y3="0.62540773" z3="-0.85091284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.26869804" y3="-1.05709238" z3="-1.43383372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64562308" y3="0.57992502" z3="0.55341612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17430408" y3="0.11768178" z3="2.18799322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00613971" y3="1.44482971" z3="1.33280747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.58868137" y3="-0.08261263" z3="2.20994385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93613231" y3="-1.69544205" z3="1.52811966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.66321496" y3="-1.50516522" z3="2.78649332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04591707" y3="-4.01303284" z3="0.89553605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49865397" y3="-4.32636666" z3="1.76054101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33988179" y3="-5.66694756" z3="0.89716717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27178038" y3="-2.1995531" z3="-0.18660764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13485671" y3="-3.30641757" z3="-1.03689777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50036052" y3="-4.46611031" z3="-0.60795714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00525635" y3="-4.51324423" z3="0.68963487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14894536" y3="-3.4456367" z3="1.57081273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77636765" y3="-2.28961427" z3="1.124275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48814525" y3="-3.24298777" z3="-2.06937757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36445776" y3="-5.31418429" z3="-1.27959363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27363692" y3="-5.70120589" z3="1.13130036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74476798" y3="-3.51987937" z3="2.58144726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86686119" y3="-1.43608998" z3="1.79741116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49192894" y3="4.02575837" z3="0.09236669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86450627" y3="3.82336397" z3="0.03313036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41260881" y3="3.32284452" z3="-1.14312049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62939139" y3="3.04862246" z3="-2.26158029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25713752" y3="3.24841129" z3="-2.1825175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0395385" y3="4.37529212" z3="1.02338595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50750029" y3="4.02638133" z3="0.88998858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85010267" y3="3.04567129" z3="-1.19700786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09667191" y3="2.66985654" z3="-3.17147366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37047988" y3="3.00975973" z3="-3.04265344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18300765" y3="-5.90355417" z3="2.32114617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7808075" y3="-6.41212304" z3="0.27445463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33978429" y3="2.79345063" z3="-2.27501091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47144512" y3="3.06303149" z3="-0.15056868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58859047" y3="0.16124306" z3="-2.07291875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9191716" y3="1.40976925" z3="-1.91861713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.75432494" y3="0.08925018" z3="-2.88466157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.22340204" y3="1.19773767" z3="-3.54483582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.26479251" y3="-0.87357573" z3="-2.98452495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.11694147" y3="1.12986596" z3="-4.17156544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41388085" y3="2.53240556" z3="-2.63984982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.53446913" y3="2.42905757" z3="-3.4285889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88688056" y3="3.48614428" z3="-2.56949246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.89324648" y3="3.30472747" z3="-3.97687113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57964935" y3="3.89668104" z3="-0.24378506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76629292" y3="5.04727462" z3="-0.02675653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93431549" y3="3.94078978" z3="0.19107347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46034518" y3="5.07693755" z3="0.75752696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56062923" y3="3.05385692" z3="0.07815595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50366881" y3="5.08475226" z3="1.0855106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34320042" y3="6.21290979" z3="0.54902143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66256106" y3="6.23382075" z3="0.9277414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70933937" y3="7.0926167" z3="0.6971495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09464825" y3="7.13371921" z3="1.3741283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33730365" y3="-3.97065749" z3="-2.8678394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52441308" y3="-5.00003107" z3="-2.52546654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20501103" y3="-3.655359" z3="-3.47794472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45755805" y3="-3.97802148" z3="-3.53088864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68888169" y3="-1.6222197" z3="-2.12106801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42469849" y3="-1.15934557" z3="-2.80239919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52612582" y3="-0.94800064" z3="-1.26606711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74017156" y3="-1.6704771" z3="-2.67615424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9013,-.9578,-.7069;6.5709,-1.9536,-1.6004;6.056,-.9991,-1.454;4.7577,1.4755,-1.0821;4.2743,.3087,-.5156;2.6425,2.744,-1.1377;3.9951,2.7347,-.8471;2.3818,4.9931,-.3339;1.8023,3.8593,-.8528;1.7607,5.8688,-.1208;2.0679,1.6234,-1.6641;3.1225,.3576,.2152;1.6995,.3913,-.6272;.606,.74,.314;1.6369,-.846,-1.4947;1.0951,-2.473,-1.313;2.1037,-5.5205,-6.2292;1.8196,-5.0807,-5.2689;1.0787,-3.9264,-2.8305;1.7825,-3.6995,-5.1302;1.5133,-5.9014,-4.1805;1.1575,-5.3181,-2.9711;1.4206,-3.0904,-3.9179;2.0278,-3.0368,-5.9637;1.5658,-6.9896,-4.2669;.9583,-5.9469,-2.0991;.6625,-3.3713,-1.5936;-.3372,-3.8558,-.849;-.6745,-4.8613,-1.1136;-.3791,-3.5462,.5976;-.4081,-3.0601,3.354;-.6766,-4.5794,1.4943;-.1171,-2.2652,1.0922;-.1279,-2.0244,2.4617;-.6826,-4.3383,2.8669;-.8615,-5.5897,1.1188;.0833,-1.4268,.4243;.0922,-1.0137,2.8154;-.8806,-5.1609,3.5586;-.4059,-2.8745,4.432;1.3724,-1.7547,-3.8977;1.4812,-1.3407,-2.9959;.3304,3.7278,-1.0027;-2.1261,-3.0046,-1.7194;-2.9146,-3.1656,-.5765;-3.1123,-2.2748,.3392;-3.8441,-.706,.5706;-4.6676,-.2272,-1.0336;-2.5372,.4551,1.1983;-5.121,-1.0375,1.895;-3.3947,-4.3742,-.3203;-4.1099,-4.5942,.8861;-3.9499,.0935,-1.8078;-5.3434,.6254,-.8509;-5.2687,-1.0571,-1.4338;-1.6456,.5799,.5534;-2.1743,.1177,2.188;-3.0061,1.4448,1.3328;-5.5887,-.0826,2.2099;-5.9361,-1.6954,1.5281;-4.6632,-1.5052,2.7865;-5.0459,-4.013,.8955;-3.4987,-4.3264,1.7605;-4.3399,-5.6669,.8972;4.2718,-2.1996,-.1866;4.1349,-3.3064,-1.0369;3.5004,-4.4661,-.608;3.0053,-4.5132,.6896;3.1489,-3.4456,1.5708;3.7764,-2.2896,1.1243;4.4881,-3.243,-2.0694;3.3645,-5.3142,-1.2796;2.2736,-5.7012,1.1313;2.7448,-3.5199,2.5814;3.8669,-1.4361,1.7974;-.4919,4.0258,.0924;-1.8645,3.8234,.0331;-2.4126,3.3228,-1.1431;-1.6294,3.0486,-2.2616;-.2571,3.2484,-2.1825;-.0395,4.3753,1.0234;-2.5075,4.0264,.89;-3.8501,3.0457,-1.197;-2.0967,2.6699,-3.1715;.3705,3.0098,-3.0427;2.183,-5.9036,2.3211;1.7808,-6.4121,.2745;-4.3398,2.7935,-2.275;-4.4714,3.063,-.1506;6.5886,.1612,-2.0729;5.9192,1.4098,-1.9186;7.7543,.0893,-2.8847;8.2234,1.1977,-3.5448;8.2648,-.8736,-2.9845;9.1169,1.1299,-4.1716;6.4139,2.5324,-2.6398;7.5345,2.4291,-3.4286;5.8869,3.4861,-2.5695;7.8932,3.3047,-3.9769;4.5796,3.8967,-.2438;3.7663,5.0473,-.0268;5.9343,3.9408,.1911;6.4603,5.0769,.7575;6.5606,3.0539,.0782;7.5037,5.0848,1.0855;4.3432,6.2129,.549;5.6626,6.2338,.9277;3.7093,7.0926,.6971;6.0946,7.1337,1.3741;-2.3373,-3.9707,-2.8678;-2.5244,-5,-2.5255;-3.205,-3.6554,-3.4779;-1.4576,-3.978,-3.5309;-1.6889,-1.6222,-2.1211;-2.4247,-1.1593,-2.8024;-1.5261,-.948,-1.2661;-.7402,-1.6705,-2.6762;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662798397994</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007970043207 0.001033240658 0.028300397648 0.005338129976</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045027754 -0.005506118 0.000136732 0.000217548 0.000278957 0.000333716 0.000367095 0.000419207 0.000496313 0.000632166 0.000672502 0.000786856 0.000805418 0.001065132 0.001122680 0.001189665 0.001251329 0.001298116 0.001363541 0.001443389 0.001494326 0.001755746 0.001885761 0.002034760 0.002186847 0.002550280 0.002749516 0.003023306 0.003312956 0.003658312 0.003958603 0.004289443 0.004635703 0.004759215 0.004996461 0.005600465 0.005707226 0.006161324 0.006475204 0.006773349 0.007388660 0.007607492 0.008215840 0.008811831 0.009182914 0.009918839 0.010077713 0.010282217 0.011428861 0.012755865 0.012876463 0.013232725 0.014252554 0.014449993 0.014857766 0.015313419 0.015595950 0.015749185 0.016077556 0.016395384 0.017436952 0.017943821 0.018846669 0.019246784 0.020383295 0.021273681 0.022198842 0.022269647 0.023039590 0.023400233 0.024575188 0.025950806 0.026275118 0.026673460 0.027168457 0.027777640 0.029141671 0.029829731 0.030425527 0.031770780 0.032348192 0.032753906 0.036512533 0.038232999 0.039352710 0.040341195 0.040999534 0.042278001 0.043365389 0.045258763 0.046154853 0.048463032 0.049669403 0.050683664 0.051365897 0.051569364 0.051808729 0.052281712 0.052388021 0.052566762 0.053809655 0.054729335 0.055159857 0.056493282 0.056837296 0.056961087 0.057227294 0.057730153 0.058550018 0.059219755 0.060417920 0.060488435 0.060902809 0.061564474 0.062341493 0.063242266 0.063868829 0.064604136 0.065198717 0.065940495 0.067914472 0.068545026 0.070292629 0.071881661 0.072663441 0.073895557 0.076491619 0.078400454 0.080652243 0.082274684 0.085737920 0.087339687 0.089485564 0.090841429 0.092843514 0.093413224 0.094222832 0.095264778 0.095569003 0.096492382 0.097036531 0.097548514 0.099443427 0.100349263 0.101230627 0.102542873 0.102780599 0.103685417 0.104046182 0.106942048 0.107479301 0.108886910 0.110288653 0.110420324 0.111034829 0.112558044 0.113922462 0.116031420 0.116497934 0.117358132 0.119164734 0.121423197 0.123083891 0.126510407 0.127674999 0.128821749 0.131330974 0.133186929 0.134822030 0.136811378 0.139381491 0.142122553 0.144538676 0.145754997 0.146779979 0.150207058 0.152517495 0.157310535 0.165308171 0.170496902 0.174333791 0.176210273 0.180522279 0.183217066 0.185572684 0.187214347 0.187974200 0.188923547 0.196197284 0.198633497 0.201820395 0.205147644 0.205396970 0.206798527 0.207159541 0.209078422 0.210912637 0.212831661 0.215648644 0.220579135 0.224827921 0.228347940 0.231521441 0.232722216 0.233710287 0.235136713 0.244510333 0.249189859 0.254580068 0.255343101 0.256708726 0.258815946 0.271373473 0.277666070 0.290036707 0.296239072 0.298267491 0.299477703 0.304285741 0.306222172 0.307545159 0.317138650 0.320582157 0.322786832 0.327236142 0.328940697 0.345999161 0.350620131 0.353878135 0.354751011 0.359211801 0.363853016 0.381864436 0.390509153 0.405584095 0.409498463 0.417910579 0.430116255 0.430862914 0.445158757 0.463875590 0.464000671 0.477881417 0.478093837 0.483608855 0.490628039 0.498026953 0.510771162 0.542518928 0.565088430 0.566775259 0.582858155 0.583757106 0.604402481 0.635313331 0.643894881 0.662757979 0.665863029 0.672241496 0.681397180 0.691713932 0.698713265 0.704241415 0.705300717 0.714517537 0.722043171 0.735409975 0.737373954 0.750680542 0.771578314 0.775843647 0.801439931 0.816773519 0.819869516 0.820647353 0.831213339 0.839974418 0.841024176 0.845983301 0.848634419 0.849858437 0.857650128 0.858290068 0.864267724 0.867344150 0.872262751 0.875905213 0.887440349 0.889539368 0.890273573 0.893811614 0.917011359 0.920063071 0.923879990 0.925106361 0.931530548 0.938230219 0.958448452 0.961889469 0.969478773 0.975890277 0.989254904 0.999621010 1.013038628 1.034050535 1.042620895 1.049293362 1.055254432 1.075231490 1.084201052 1.088667382 1.109991697 1.110586816 1.116280302 1.122412398 1.123319689 1.134147540 1.142838917 1.161223074 1.168756783 1.172627066 1.173247757 1.200409805 1.204314119 1.216196241 1.247296789 1.293844208 1.295710265 1.312647593 1.316315763 1.326280584 1.326909860 1.330137591 1.334490502 1.340965822 1.345921012 1.362254618 1.378766612 1.380773748 1.381152597 1.382533557 1.446026399 1.557475773 1.671854957 1.817605793</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">72</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89915617" y3="-0.95800012" z3="-0.70760035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56708244" y3="-1.95450226" z3="-1.60340533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05247514" y3="-0.99995565" z3="-1.45680929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75542283" y3="1.47511906" z3="-1.08403299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27274005" y3="0.30874312" z3="-0.51603396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64071799" y3="2.74489091" z3="-1.13514586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99407034" y3="2.73480041" z3="-0.84770541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38318801" y3="4.99428392" z3="-0.33052074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80200158" y3="3.86069754" z3="-0.84816037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7629468" y3="5.87014811" z3="-0.11575268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0638647" y3="1.6247505" z3="-1.66023281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12227004" y3="0.35848263" z3="0.21691447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69762324" y3="0.39234456" z3="-0.62281107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60596281" y3="0.74052197" z3="0.32070677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6333263" y3="-0.8447492" z3="-1.49059029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09534111" y3="-2.47307795" z3="-1.31017687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.11598825" y3="-5.52005978" z3="-6.22419619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.82954249" y3="-5.08046228" z3="-5.2645155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08261508" y3="-3.92662564" z3="-2.82753046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.79191756" y3="-3.69934803" z3="-5.12562339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52059774" y3="-5.90139317" z3="-4.17697163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16191156" y3="-5.31836994" z3="-2.96826747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42685607" y3="-3.09049128" z3="-3.91408731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03919197" y3="-3.03641841" z3="-5.95842381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5733662" y3="-6.98959064" z3="-4.26344377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96087565" y3="-5.94736158" z3="-2.0969199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66401222" y3="-3.37181016" z3="-1.59125541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33632453" y3="-3.85702211" z3="-0.84800228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67253409" y3="-4.86274531" z3="-1.1131439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38032136" y3="-3.54739222" z3="0.59844205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41091225" y3="-3.0602867" z3="3.35493931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67721032" y3="-4.58125457" z3="1.4957035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12032668" y3="-2.26506771" z3="1.09248989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13189582" y3="-2.02379579" z3="2.46199417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68386172" y3="-4.33975782" z3="2.8684931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86043988" y3="-5.59301846" z3="1.12102864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07962999" y3="-1.42634945" z3="0.42425426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0869779" y3="-1.0119352" z3="2.81493232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88080352" y3="-5.16299107" z3="3.56103798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40913142" y3="-2.87473899" z3="4.43306612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37852353" y3="-1.75474914" z3="-3.89399647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48384136" y3="-1.34046321" z3="-2.99199476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32959187" y3="3.72988925" z3="-0.99487061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12500507" y3="-3.00675355" z3="-1.72128351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91543506" y3="-3.16532971" z3="-0.57898444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11429252" y3="-2.27355326" z3="0.33563117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84316419" y3="-0.70466118" z3="0.56727968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.65661001" y3="-0.22189237" z3="-1.04127013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54185377" y3="0.45075774" z3="1.1982639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.13353221" y3="-1.03519016" z3="1.88038219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39752124" y3="-4.37227874" z3="-0.32419194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11093693" y3="-4.59372114" z3="0.88339191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.93925741" y3="0.10458771" z3="-1.80903388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34743001" y3="0.62413708" z3="-0.86103796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.25171381" y3="-1.05771606" z3="-1.46213411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65805697" y3="0.57422223" z3="0.5503419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17573509" y3="0.11034215" z3="2.17933676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01025123" y3="1.44660984" z3="1.33104718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60149502" y3="-0.08756604" z3="2.19856529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93088997" y3="-1.70090069" z3="1.5185153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.67547307" y3="-1.49303615" z3="2.77350237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04982476" y3="-4.01520593" z3="0.89104377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49709637" y3="-4.31973169" z3="1.75716439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33690866" y3="-5.669749" z3="0.8993866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27042238" y3="-2.19950545" z3="-0.18571048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13434976" y3="-3.30751897" z3="-1.03470475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50065006" y3="-4.46717698" z3="-0.6045061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00511977" y3="-4.51303571" z3="0.69295464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14814785" y3="-3.44434102" z3="1.57298488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7750887" y3="-2.28849562" z3="1.12531287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48765094" y3="-3.24515816" z3="-2.06725239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36557617" y3="-5.31616516" z3="-1.27519444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27382585" y3="-5.7008741" z3="1.13569113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74396608" y3="-3.5177069" z3="2.58368026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86524131" y3="-1.43435624" z3="1.79769709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48962179" y3="4.02306634" z3="0.104101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86240067" y3="3.82125374" z3="0.04739369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41343869" y3="3.32621337" z3="-1.12992702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63341693" y3="3.05703856" z3="-2.25217979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26083655" y3="3.25565166" z3="-2.17553572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03414143" y3="4.36746596" z3="1.03638193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50297686" y3="4.02036819" z3="0.90760673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85153301" y3="3.05129657" z3="-1.18213643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10308505" y3="2.68272717" z3="-3.16273352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36477296" y3="3.01995212" z3="-3.03828349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18333325" y3="-5.90237439" z3="2.32580037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7811544" y3="-6.41256448" z3="0.27938673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34680452" y3="2.81111759" z3="-2.26458316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47011032" y3="3.06361284" z3="-0.13496804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58401783" y3="0.15985517" z3="-2.07763777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91510058" y3="1.408583" z3="-1.9229212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74806158" y3="0.08707201" z3="-2.89174294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.21585166" y3="1.19498031" z3="-3.55380335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25820419" y3="-0.8759022" z3="-2.99192299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.10804822" y3="1.1264971" z3="-4.18238196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.40841485" y3="2.53061352" z3="-2.64604888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.52729785" y3="2.42648852" z3="-3.43709845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88165208" y3="3.48446692" z3="-2.5753084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88498622" y3="3.30166824" z3="-3.98687812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58074007" y3="3.89658738" z3="-0.24603785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7685698" y3="5.04774056" z3="-0.0270767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93659871" y3="3.94002925" z3="0.18529542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46481665" y3="5.07610802" z3="0.74994067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56214023" y3="3.05266814" z3="0.07104681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50905475" y3="5.08340604" z3="1.07512262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34769745" y3="6.21328263" z3="0.54676737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66814542" y3="6.23358551" z3="0.92184773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71474123" y3="7.09347583" z3="0.69627443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10199103" y3="7.13346403" z3="1.36664473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33399678" y3="-3.9750298" z3="-2.86896301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52024376" y3="-5.00433456" z3="-2.52584814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20106022" y3="-3.66155118" z3="-3.48133193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4531109" y3="-3.98231519" z3="-3.53042872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68733521" y3="-1.62460325" z3="-2.12488443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42132378" y3="-1.16202599" z3="-2.8100919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52857495" y3="-0.94940031" z3="-1.26851987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73213927" y3="-1.67549336" z3="-2.67502648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8992,-.958,-.7076;6.5671,-1.9545,-1.6034;6.0525,-1,-1.4568;4.7554,1.4751,-1.084;4.2727,.3087,-.516;2.6407,2.7449,-1.1351;3.9941,2.7348,-.8477;2.3832,4.9943,-.3305;1.802,3.8607,-.8482;1.7629,5.8701,-.1158;2.0639,1.6248,-1.6602;3.1223,.3585,.2169;1.6976,.3923,-.6228;.606,.7405,.3207;1.6333,-.8447,-1.4906;1.0953,-2.4731,-1.3102;2.116,-5.5201,-6.2242;1.8295,-5.0805,-5.2645;1.0826,-3.9266,-2.8275;1.7919,-3.6993,-5.1256;1.5206,-5.9014,-4.177;1.1619,-5.3184,-2.9683;1.4269,-3.0905,-3.9141;2.0392,-3.0364,-5.9584;1.5734,-6.9896,-4.2634;.9609,-5.9474,-2.0969;.664,-3.3718,-1.5913;-.3363,-3.857,-.848;-.6725,-4.8627,-1.1131;-.3803,-3.5474,.5984;-.4109,-3.0603,3.3549;-.6772,-4.5813,1.4957;-.1203,-2.2651,1.0925;-.1319,-2.0238,2.462;-.6839,-4.3398,2.8685;-.8604,-5.593,1.121;.0796,-1.4263,.4243;.087,-1.0119,2.8149;-.8808,-5.163,3.561;-.4091,-2.8747,4.4331;1.3785,-1.7547,-3.894;1.4838,-1.3405,-2.992;.3296,3.7299,-.9949;-2.125,-3.0068,-1.7213;-2.9154,-3.1653,-.579;-3.1143,-2.2736,.3356;-3.8432,-.7047,.5673;-4.6566,-.2219,-1.0413;-2.5419,.4508,1.1983;-5.1335,-1.0352,1.8804;-3.3975,-4.3723,-.3242;-4.1109,-4.5937,.8834;-3.9393,.1046,-1.809;-5.3474,.6241,-.861;-5.2517,-1.0577,-1.4621;-1.6581,.5742,.5503;-2.1757,.1103,2.1793;-3.0103,1.4466,1.331;-5.6015,-.0876,2.1986;-5.9309,-1.7009,1.5185;-4.6755,-1.493,2.7735;-5.0498,-4.0152,.891;-3.4971,-4.3197,1.7572;-4.3369,-5.6697,.8994;4.2704,-2.1995,-.1857;4.1343,-3.3075,-1.0347;3.5007,-4.4672,-.6045;3.0051,-4.513,.693;3.1481,-3.4443,1.573;3.7751,-2.2885,1.1253;4.4877,-3.2452,-2.0673;3.3656,-5.3162,-1.2752;2.2738,-5.7009,1.1357;2.744,-3.5177,2.5837;3.8652,-1.4344,1.7977;-.4896,4.0231,.1041;-1.8624,3.8213,.0474;-2.4134,3.3262,-1.1299;-1.6334,3.057,-2.2522;-.2608,3.2557,-2.1755;-.0341,4.3675,1.0364;-2.503,4.0204,.9076;-3.8515,3.0513,-1.1821;-2.1031,2.6827,-3.1627;.3648,3.02,-3.0383;2.1833,-5.9024,2.3258;1.7812,-6.4126,.2794;-4.3468,2.8111,-2.2646;-4.4701,3.0636,-.135;6.584,.1599,-2.0776;5.9151,1.4086,-1.9229;7.7481,.0871,-2.8917;8.2159,1.195,-3.5538;8.2582,-.8759,-2.9919;9.108,1.1265,-4.1824;6.4084,2.5306,-2.646;7.5273,2.4265,-3.4371;5.8817,3.4845,-2.5753;7.885,3.3017,-3.9869;4.5807,3.8966,-.246;3.7686,5.0477,-.0271;5.9366,3.94,.1853;6.4648,5.0761,.7499;6.5621,3.0527,.071;7.5091,5.0834,1.0751;4.3477,6.2133,.5468;5.6681,6.2336,.9218;3.7147,7.0935,.6963;6.102,7.1335,1.3666;-2.334,-3.975,-2.869;-2.5202,-5.0043,-2.5258;-3.2011,-3.6616,-3.4813;-1.4531,-3.9823,-3.5304;-1.6873,-1.6246,-2.1249;-2.4213,-1.162,-2.8101;-1.5286,-.9494,-1.2685;-.7321,-1.6755,-2.675;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662813505123</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006606590029 0.000911808713 0.024546704848 0.005338131135</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045024667 -0.003797902 0.000136230 0.000216627 0.000279065 0.000333734 0.000368166 0.000419216 0.000496273 0.000632715 0.000674092 0.000787254 0.000806853 0.001067680 0.001123045 0.001191883 0.001251047 0.001302198 0.001370810 0.001443389 0.001495763 0.001756303 0.001885630 0.002127418 0.002188779 0.002579816 0.002888386 0.003240526 0.003422678 0.003753151 0.003962099 0.004293649 0.004642938 0.004759463 0.005015519 0.005609840 0.005750090 0.006176066 0.006504625 0.006777924 0.007394353 0.007698970 0.008283179 0.008826725 0.009190272 0.009929437 0.010115912 0.010286215 0.011438101 0.012776963 0.012897951 0.013260899 0.014270964 0.014463919 0.014857516 0.015313501 0.015624406 0.016015033 0.016220014 0.016396981 0.017437536 0.017943538 0.018871597 0.019388071 0.020394422 0.021294543 0.022209656 0.022292511 0.023039856 0.023403823 0.024577327 0.025950837 0.026275357 0.026673838 0.027187586 0.027780002 0.029151278 0.029830010 0.030425847 0.031770690 0.032355672 0.032754462 0.036527467 0.038240014 0.039364783 0.040339746 0.040999875 0.042274436 0.043365302 0.045258727 0.046154856 0.048474519 0.049669402 0.050685408 0.051365901 0.051569383 0.051810289 0.052281712 0.052388008 0.052567112 0.053809788 0.054729236 0.055223467 0.056493286 0.056837450 0.056961448 0.057227242 0.057730147 0.058551473 0.059219719 0.060420752 0.060493363 0.061043684 0.061662524 0.062341067 0.063389813 0.063885685 0.064608570 0.065263325 0.065940480 0.067914902 0.068549356 0.070301131 0.071887270 0.072663493 0.074084680 0.076493942 0.078416023 0.080658969 0.082278484 0.085743545 0.087347324 0.089485573 0.090841460 0.092844771 0.093414214 0.094226873 0.095264960 0.095575556 0.096494575 0.097061446 0.097546976 0.099445055 0.100361910 0.101230346 0.102556073 0.102781648 0.103686270 0.104059391 0.106948363 0.107477155 0.108918761 0.110292203 0.110452109 0.111031780 0.112563855 0.113923520 0.116075643 0.116507126 0.117357828 0.119817013 0.121689873 0.123105382 0.126539567 0.127690890 0.128870447 0.131392335 0.133288355 0.134906803 0.136903117 0.140004058 0.142130266 0.144538611 0.145753429 0.146820771 0.150913726 0.152523048 0.157322652 0.165327538 0.170503259 0.174347992 0.176230065 0.180540351 0.183227491 0.185602595 0.187251814 0.188180662 0.188987218 0.196586234 0.198634917 0.201826504 0.205210887 0.205404896 0.206799562 0.207159590 0.209078472 0.210917069 0.212841113 0.215665031 0.220690836 0.224829799 0.230666330 0.231522775 0.232763854 0.233712136 0.235136858 0.244520633 0.249217546 0.254582554 0.255345118 0.256709239 0.258816967 0.271375640 0.277673816 0.290037723 0.296244183 0.298267550 0.299479922 0.304290289 0.306224021 0.307545353 0.317138146 0.320582134 0.322787037 0.327236960 0.328945775 0.346007313 0.350620920 0.353986767 0.354751240 0.359230530 0.363853583 0.381925385 0.392112732 0.405591915 0.409687491 0.419989616 0.430130417 0.430863974 0.445160173 0.463886142 0.464020138 0.477881413 0.478093608 0.483610806 0.491292426 0.498027403 0.510771412 0.542520213 0.565091047 0.566775310 0.582865013 0.583758324 0.604403453 0.635454012 0.643895566 0.663106218 0.665877298 0.672250920 0.681397660 0.691714081 0.698729875 0.704241425 0.705300593 0.714518425 0.722945754 0.736274921 0.737395615 0.750680562 0.771579000 0.775843665 0.801571391 0.816778671 0.819870286 0.820651788 0.831220357 0.840034417 0.841091112 0.845983243 0.848746492 0.849884737 0.858269450 0.860666899 0.864364694 0.867344657 0.872263416 0.875906113 0.888785072 0.890235614 0.890426930 0.893821089 0.917051939 0.920350940 0.923901047 0.927856297 0.931738882 0.938427384 0.958450849 0.961936389 0.969479435 0.975890189 0.989255350 0.999621023 1.013040475 1.034051136 1.042622649 1.049294824 1.055254940 1.075337327 1.084201447 1.088667473 1.109991760 1.110586942 1.116291955 1.122412520 1.123319992 1.134148757 1.142846749 1.161227552 1.168759402 1.172628478 1.173250965 1.200410435 1.204333527 1.216196782 1.247296870 1.293852462 1.295710265 1.312695743 1.316399327 1.326280775 1.326918417 1.330137703 1.334490505 1.340970821 1.345966283 1.362255997 1.378768152 1.380776006 1.381156465 1.382540339 1.446654321 1.557476264 1.671856121 1.820270477</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">73</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89727262" y3="-0.95804847" z3="-0.70808983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5637401" y3="-1.95524634" z3="-1.60587322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04931471" y3="-1.00061447" z3="-1.45925106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75319245" y3="1.47490585" z3="-1.08607465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27141903" y3="0.30897667" z3="-0.51634558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63885259" y3="2.74572287" z3="-1.13222684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99296523" y3="2.73506055" z3="-0.84842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3843481" y3="4.9954059" z3="-0.32756531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80133818" y3="3.86187257" z3="-0.84301191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76499723" y3="5.87149307" z3="-0.11154809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06022862" y3="1.6259426" z3="-1.65601923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12245264" y3="0.35948605" z3="0.21883131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69618146" y3="0.39335429" z3="-0.61810591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60632093" y3="0.74115185" z3="0.32749324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63035994" y3="-0.84364807" z3="-1.48599083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09597311" y3="-2.47312887" z3="-1.30695541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.12709092" y3="-5.51841134" z3="-6.2197527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.83856546" y3="-5.07923334" z3="-5.26051998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0865409" y3="-3.92646731" z3="-2.82474055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.800178" y3="-3.69821281" z3="-5.12127342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52773103" y3="-5.90064951" z3="-4.17388676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16647163" y3="-5.31813306" z3="-2.96575499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.43261001" y3="-3.08977636" z3="-3.9102613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.04890011" y3="-3.03492689" z3="-5.95333842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.58104742" y3="-6.98878807" z3="-4.26060259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96402305" y3="-5.9475107" z3="-2.095034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66579486" y3="-3.37220781" z3="-1.58885224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33369925" y3="-3.85912754" z3="-0.84636958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67024225" y3="-4.86435418" z3="-1.1124051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38110017" y3="-3.54805747" z3="0.59954339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41521519" y3="-3.06086828" z3="3.35559816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67902882" y3="-4.58155266" z3="1.49617648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12158645" y3="-2.26647744" z3="1.0940935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13478617" y3="-2.02509712" z3="2.463454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68738149" y3="-4.33985894" z3="2.86872466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86133236" y3="-5.59292226" z3="1.12123203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08012623" y3="-1.42858639" z3="0.42656667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08405235" y3="-1.01399379" z3="2.81682735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88488538" y3="-5.16288505" z3="3.56045805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41416378" y3="-2.87524036" z3="4.43366802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.38411894" y3="-1.75418606" z3="-3.89004561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48594834" y3="-1.33969502" z3="-2.98768924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32856726" y3="3.73160769" z3="-0.98645956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12483031" y3="-3.00835762" z3="-1.72404386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91520266" y3="-3.16668002" z3="-0.58263206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11657079" y3="-2.27214966" z3="0.32962368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84383692" y3="-0.70407161" z3="0.55941739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64906301" y3="-0.21840797" z3="-1.05235069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54244905" y3="0.44970148" z3="1.19791246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14470535" y3="-1.03599695" z3="1.86751294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39387127" y3="-4.37659065" z3="-0.3229658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1109546" y3="-4.59450681" z3="0.88211072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.92566291" y3="0.11281807" z3="-1.81419525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33918111" y3="0.62431168" z3="-0.87125891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.23608893" y3="-1.05275589" z3="-1.4718439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6502702" y3="0.57601728" z3="0.55371105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18126322" y3="0.09973673" z3="2.18354031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0096172" y3="1.43916167" z3="1.34134325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60960653" y3="-0.08220108" z3="2.17918302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95214718" y3="-1.69350162" z3="1.4939686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6984012" y3="-1.50720312" z3="2.76233729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04737014" y3="-4.01367794" z3="0.88984371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50064703" y3="-4.32593558" z3="1.75652943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34063258" y3="-5.66681936" z3="0.89359319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26937656" y3="-2.19930232" z3="-0.18450408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13422871" y3="-3.30849465" z3="-1.03212059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50129983" y3="-4.4680805" z3="-0.60063582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00528566" y3="-4.51269534" z3="0.69666796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14751247" y3="-3.44288101" z3="1.57546154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77393066" y3="-2.28719335" z3="1.1265939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48757319" y3="-3.24722698" z3="-2.06471345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36695729" y3="-5.31787656" z3="-1.27036757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27404714" y3="-5.70017351" z3="1.14025445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74302683" y3="-3.51517722" z3="2.58612457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86343765" y3="-1.43229842" z3="1.79810766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48852849" y3="4.02166367" z3="0.11399397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86165574" y3="3.82104887" z3="0.05886574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41505075" y3="3.33081754" z3="-1.11855277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63672521" y3="3.06369551" z3="-2.24167531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26388825" y3="3.26070302" z3="-2.16670956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0317674" y3="4.36347787" z3="1.04549109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50052026" y3="4.01715932" z3="0.92038964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85352519" y3="3.05739015" z3="-1.16966417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10843057" y3="2.6929329" z3="-3.15232979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36035574" y3="3.02715088" z3="-3.03069316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18299308" y3="-5.90046551" z3="2.33041581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78177471" y3="-6.41269083" z3="0.28439006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34817758" y3="2.81994033" z3="-2.24853401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46990698" y3="3.0615137" z3="-0.1194678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57969858" y3="0.15860638" z3="-2.0821256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91110537" y3="1.40748533" z3="-1.92732804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74219363" y3="0.08501624" z3="-2.89835414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.20868824" y3="1.19225502" z3="-3.5624309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25214331" y3="-0.8780508" z3="-2.99852241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0996833" y3="1.12315548" z3="-4.19262882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.40296369" y3="2.52875952" z3="-2.65259789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5203022" y3="2.423843" z3="-3.44570775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87627495" y3="3.48263702" z3="-2.58184344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.87687943" y3="3.2984503" z3="-3.99711032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58175197" y3="3.89690743" z3="-0.24895336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77070672" y3="5.04851456" z3="-0.02841518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93886269" y3="3.94011553" z3="0.17840843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46928056" y3="5.07645808" z3="0.74035946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56366619" y3="3.05241137" z3="0.063193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51447993" y3="5.08358986" z3="1.06238849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35208638" y3="6.21429163" z3="0.54252594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67369421" y3="6.23442783" z3="0.91345878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7199744" y3="7.09486348" z3="0.69305923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10930628" y3="7.13456346" z3="1.35592455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33089569" y3="-3.97784231" z3="-2.8706611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51857103" y3="-5.00645725" z3="-2.52703927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1959871" y3="-3.6641118" z3="-3.48451874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44865352" y3="-3.9863588" z3="-3.53038202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68474577" y3="-1.62758059" z3="-2.12738277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41796128" y3="-1.16449159" z3="-2.81164061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52459478" y3="-0.95217812" z3="-1.27231104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7342226" y3="-1.67751636" z3="-2.67973155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8973,-.958,-.7081;6.5637,-1.9552,-1.6059;6.0493,-1.0006,-1.4593;4.7532,1.4749,-1.0861;4.2714,.309,-.5163;2.6389,2.7457,-1.1322;3.993,2.7351,-.8484;2.3843,4.9954,-.3276;1.8013,3.8619,-.843;1.765,5.8715,-.1115;2.0602,1.6259,-1.656;3.1225,.3595,.2188;1.6962,.3934,-.6181;.6063,.7412,.3275;1.6304,-.8436,-1.486;1.096,-2.4731,-1.307;2.1271,-5.5184,-6.2198;1.8386,-5.0792,-5.2605;1.0865,-3.9265,-2.8247;1.8002,-3.6982,-5.1213;1.5277,-5.9006,-4.1739;1.1665,-5.3181,-2.9658;1.4326,-3.0898,-3.9103;2.0489,-3.0349,-5.9533;1.581,-6.9888,-4.2606;.964,-5.9475,-2.095;.6658,-3.3722,-1.5889;-.3337,-3.8591,-.8464;-.6702,-4.8644,-1.1124;-.3811,-3.5481,.5995;-.4152,-3.0609,3.3556;-.679,-4.5816,1.4962;-.1216,-2.2665,1.0941;-.1348,-2.0251,2.4635;-.6874,-4.3399,2.8687;-.8613,-5.5929,1.1212;.0801,-1.4286,.4266;.0841,-1.014,2.8168;-.8849,-5.1629,3.5605;-.4142,-2.8752,4.4337;1.3841,-1.7542,-3.89;1.4859,-1.3397,-2.9877;.3286,3.7316,-.9865;-2.1248,-3.0084,-1.724;-2.9152,-3.1667,-.5826;-3.1166,-2.2721,.3296;-3.8438,-.7041,.5594;-4.6491,-.2184,-1.0524;-2.5424,.4497,1.1979;-5.1447,-1.036,1.8675;-3.3939,-4.3766,-.323;-4.111,-4.5945,.8821;-3.9257,.1128,-1.8142;-5.3392,.6243,-.8713;-5.2361,-1.0528,-1.4718;-1.6503,.576,.5537;-2.1813,.0997,2.1835;-3.0096,1.4392,1.3413;-5.6096,-.0822,2.1792;-5.9521,-1.6935,1.494;-4.6984,-1.5072,2.7623;-5.0474,-4.0137,.8898;-3.5006,-4.3259,1.7565;-4.3406,-5.6668,.8936;4.2694,-2.1993,-.1845;4.1342,-3.3085,-1.0321;3.5013,-4.4681,-.6006;3.0053,-4.5127,.6967;3.1475,-3.4429,1.5755;3.7739,-2.2872,1.1266;4.4876,-3.2472,-2.0647;3.367,-5.3179,-1.2704;2.274,-5.7002,1.1403;2.743,-3.5152,2.5861;3.8634,-1.4323,1.7981;-.4885,4.0217,.114;-1.8617,3.821,.0589;-2.4151,3.3308,-1.1186;-1.6367,3.0637,-2.2417;-.2639,3.2607,-2.1667;-.0318,4.3635,1.0455;-2.5005,4.0172,.9204;-3.8535,3.0574,-1.1697;-2.1084,2.6929,-3.1523;.3604,3.0272,-3.0307;2.183,-5.9005,2.3304;1.7818,-6.4127,.2844;-4.3482,2.8199,-2.2485;-4.4699,3.0615,-.1195;6.5797,.1586,-2.0821;5.9111,1.4075,-1.9273;7.7422,.085,-2.8984;8.2087,1.1923,-3.5624;8.2521,-.8781,-2.9985;9.0997,1.1232,-4.1926;6.403,2.5288,-2.6526;7.5203,2.4238,-3.4457;5.8763,3.4826,-2.5818;7.8769,3.2985,-3.9971;4.5818,3.8969,-.249;3.7707,5.0485,-.0284;5.9389,3.9401,.1784;6.4693,5.0765,.7404;6.5637,3.0524,.0632;7.5145,5.0836,1.0624;4.3521,6.2143,.5425;5.6737,6.2344,.9135;3.72,7.0949,.6931;6.1093,7.1346,1.3559;-2.3309,-3.9778,-2.8707;-2.5186,-5.0065,-2.527;-3.196,-3.6641,-3.4845;-1.4487,-3.9864,-3.5304;-1.6847,-1.6276,-2.1274;-2.418,-1.1645,-2.8116;-1.5246,-.9522,-1.2723;-.7342,-1.6775,-2.6797;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662835447300</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006071877384 0.000696871935 0.029088943592 0.005337090980</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045066884 -0.002535268 0.000136893 0.000213696 0.000287897 0.000334384 0.000367683 0.000420157 0.000496946 0.000633585 0.000675027 0.000795403 0.000806678 0.001068147 0.001129743 0.001192317 0.001251538 0.001301438 0.001373158 0.001444180 0.001496408 0.001756629 0.001895911 0.002124343 0.002189812 0.002587632 0.002914255 0.003272681 0.003441179 0.003741121 0.003965800 0.004292982 0.004644512 0.004762935 0.005019284 0.005609574 0.005779631 0.006190297 0.006559809 0.006780506 0.007398683 0.007760522 0.008326533 0.008843599 0.009216614 0.009990237 0.010225931 0.010371614 0.011472639 0.012783521 0.012905074 0.013271645 0.014274825 0.014465275 0.014857294 0.015314635 0.015627878 0.016028003 0.016310825 0.016399034 0.017437976 0.017946374 0.018880901 0.019404697 0.020397479 0.021293503 0.022213290 0.022357460 0.023039913 0.023407099 0.024578593 0.025951065 0.026275282 0.026673884 0.027193938 0.027780967 0.029321765 0.029829797 0.030426169 0.031771167 0.032389019 0.032755780 0.036579797 0.038263064 0.039391938 0.040363883 0.040999807 0.042299832 0.043365765 0.045259103 0.046155155 0.048483445 0.049669399 0.050686219 0.051366134 0.051569483 0.051810994 0.052281715 0.052388007 0.052567190 0.053809987 0.054730395 0.055218641 0.056493282 0.056837419 0.056961373 0.057227827 0.057730359 0.058551766 0.059219719 0.060422848 0.060496534 0.061150967 0.061831418 0.062341163 0.063577163 0.063904294 0.064613800 0.065351522 0.065941590 0.067914932 0.068561356 0.070325610 0.071890526 0.072663685 0.074224807 0.076494315 0.078432303 0.080664119 0.082283911 0.085829243 0.087352533 0.089485535 0.090841205 0.092845115 0.093414281 0.094238993 0.095265257 0.095585603 0.096496024 0.097126040 0.097550574 0.099447453 0.100378997 0.101234265 0.102572091 0.102782271 0.103691314 0.104089321 0.106951808 0.107521879 0.108925615 0.110292976 0.110458685 0.111059960 0.112566396 0.113925019 0.116110730 0.116513360 0.117357778 0.120056906 0.122004971 0.123134533 0.126563374 0.127691634 0.128916018 0.131441199 0.133378833 0.135062376 0.136956579 0.140558474 0.142143182 0.144538661 0.145758955 0.146874197 0.151179594 0.152537751 0.157346024 0.165336878 0.170510532 0.174355094 0.176254217 0.180552575 0.183231688 0.185601986 0.187382705 0.188169896 0.188988276 0.196681995 0.198634427 0.201827903 0.205251001 0.205407600 0.206802733 0.207159763 0.209078592 0.210920602 0.212849004 0.215680164 0.220776725 0.224830904 0.231516972 0.231692390 0.232828729 0.233720774 0.235137162 0.244534132 0.249267959 0.254585313 0.255350146 0.256709868 0.258819755 0.271376525 0.277678665 0.290040043 0.296249857 0.298268092 0.299480208 0.304292442 0.306224855 0.307545372 0.317140605 0.320582162 0.322787802 0.327238071 0.328948584 0.346010426 0.350620977 0.354248202 0.354751284 0.359234822 0.363854048 0.381943423 0.392395199 0.405593628 0.410623606 0.420527431 0.430136589 0.430870946 0.445164574 0.463891160 0.464020130 0.477881606 0.478099271 0.483612016 0.491762839 0.498028473 0.510777239 0.542520234 0.565091009 0.566775404 0.582864673 0.583761492 0.604403976 0.635885339 0.643895687 0.663462852 0.665885316 0.672255096 0.681399748 0.691719320 0.698791125 0.704241424 0.705303186 0.714518464 0.723299459 0.736262637 0.737397248 0.750680594 0.771579079 0.775843678 0.801693371 0.816784589 0.819870310 0.820652779 0.831221139 0.840073038 0.841142560 0.845995637 0.848864048 0.849954743 0.858271045 0.861363823 0.864388601 0.867344903 0.872263408 0.875906501 0.888976313 0.890235811 0.890939445 0.893821624 0.917292783 0.920403811 0.923905159 0.929935173 0.932706725 0.938820332 0.958456074 0.961944358 0.969497307 0.975895722 0.989260024 0.999621862 1.013047628 1.034054517 1.042622942 1.049302191 1.055255098 1.075498279 1.084203879 1.088667486 1.109992051 1.110587153 1.116309385 1.122412554 1.123320478 1.134158712 1.142886070 1.161231259 1.168761302 1.172628603 1.173253929 1.200410769 1.204350851 1.216196917 1.247296873 1.293916689 1.295712821 1.312712652 1.316445303 1.326281475 1.326926164 1.330137764 1.334492387 1.340970924 1.345993801 1.362262570 1.378768103 1.380779243 1.381158653 1.382573569 1.446718999 1.557478668 1.671856493 1.822864080</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">74</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89540866" y3="-0.95794186" z3="-0.70767034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56074862" y3="-1.95604845" z3="-1.60653469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04649508" y3="-1.00127418" z3="-1.46027599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75127522" y3="1.47468753" z3="-1.08782157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27003272" y3="0.30939716" z3="-0.51626507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63748379" y3="2.74636059" z3="-1.13027359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99217248" y3="2.73531277" z3="-0.84957818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3854898" y3="4.99636744" z3="-0.32573369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80114238" y3="3.86269974" z3="-0.83931499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76677595" y3="5.87258982" z3="-0.10805467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05678798" y3="1.62700665" z3="-1.65262671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.122203" y3="0.3610281" z3="0.22064669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6946364" y3="0.3944592" z3="-0.61404526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60604093" y3="0.74184242" z3="0.33323629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62771377" y3="-0.84243877" z3="-1.48179602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09580081" y3="-2.47254162" z3="-1.30453419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.13633832" y3="-5.516404" z3="-6.21604631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.84621975" y3="-5.07767424" z3="-5.25709402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08992877" y3="-3.92596571" z3="-2.821962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.80694793" y3="-3.69669407" z3="-5.11746871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.53420499" y3="-5.89954976" z3="-4.17113546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17083151" y3="-5.31757034" z3="-2.96335689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.43727961" y3="-3.08887141" z3="-3.90682297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05646697" y3="-3.03299222" z3="-5.94897699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5882824" y3="-6.98764586" z3="-4.2580935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96740517" y3="-5.9472772" z3="-2.09306037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66730118" y3="-3.37228828" z3="-1.58665586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33514672" y3="-3.85788463" z3="-0.84640801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66870603" y3="-4.86470449" z3="-1.111807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38235608" y3="-3.54889239" z3="0.60008718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41835694" y3="-3.06256247" z3="3.35643843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68170841" y3="-4.58219588" z3="1.49627271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12259414" y3="-2.26760701" z3="1.09519743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13647998" y3="-2.02680077" z3="2.46464542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69143119" y3="-4.3408855" z3="2.8688733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86525769" y3="-5.59263306" z3="1.12056455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07871758" y3="-1.4290168" z3="0.42732165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08234129" y3="-1.01568039" z3="2.81836512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.891222" y3="-5.16331903" z3="3.5602279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41887717" y3="-2.87697305" z3="4.43443887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.38818567" y3="-1.75320908" z3="-3.88623386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4880927" y3="-1.33891298" z3="-2.98372192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32802691" y3="3.73223572" z3="-0.97923914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12087571" y3="-3.01171361" z3="-1.72445933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91520205" y3="-3.16888437" z3="-0.58461353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11632417" y3="-2.2770077" z3="0.32854209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84766506" y3="-0.70547057" z3="0.5528843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64143282" y3="-0.21436018" z3="-1.0643776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54321003" y3="0.44318129" z3="1.2091859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14898039" y3="-1.03836898" z3="1.85073246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39873992" y3="-4.37414564" z3="-0.33002167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11331499" y3="-4.59434172" z3="0.87740768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.91351227" y3="0.12936864" z3="-1.81782079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34056199" y3="0.62357203" z3="-0.88437745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.22258306" y3="-1.05049504" z3="-1.50093284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65411361" y3="0.57612926" z3="0.56765989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18268484" y3="0.09067799" z3="2.18974636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01292678" y3="1.43589881" z3="1.35195357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61284807" y3="-0.08680139" z3="2.16487939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95421066" y3="-1.69355747" z3="1.47411099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.70597269" y3="-1.51009906" z3="2.74465084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05165148" y3="-4.01552989" z3="0.88404042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50089315" y3="-4.32011477" z3="1.75173731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3395977" y3="-5.66998472" z3="0.89373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26818055" y3="-2.19887675" z3="-0.18251851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13411281" y3="-3.30925516" z3="-1.02877919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50168062" y3="-4.46866052" z3="-0.59617521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00490414" y3="-4.51192078" z3="0.70084531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14630108" y3="-3.44105935" z3="1.57845141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77238854" y3="-2.28561225" z3="1.12855057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48779431" y3="-3.24914848" z3="-2.06132456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36821777" y3="-5.3193779" z3="-1.2649275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27357312" y3="-5.69903992" z3="1.14527656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7414042" y3="-3.51237065" z3="2.58901115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86132274" y3="-1.43011138" z3="1.79927519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48595668" y3="4.01696687" z3="0.12595642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85906794" y3="3.81619236" z3="0.07383141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41583763" y3="3.33202229" z3="-1.10566316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64077293" y3="3.07036956" z3="-2.23335342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26761832" y3="3.26655083" z3="-2.16073548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02603456" y3="4.35412256" z3="1.05854818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49593482" y3="4.00916153" z3="0.93788081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8549426" y3="3.06156065" z3="-1.15526604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11498026" y3="2.70418797" z3="-3.14498092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35491251" y3="3.03576885" z3="-3.02710224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1815645" y3="-5.89778849" z3="2.33562799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78227025" y3="-6.41282527" z3="0.28992228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35556462" y3="2.83584702" z3="-2.23814749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46918847" y3="3.06304343" z3="-0.10631005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57603915" y3="0.1571648" z3="-2.08526494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9077018" y3="1.40620874" z3="-1.93099948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73733203" y3="0.08256851" z3="-2.90310109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2027771" y3="1.1889581" z3="-3.56931533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.24716968" y3="-0.88060021" z3="-3.00276546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.09286053" y3="1.11910506" z3="-4.20070161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39830907" y3="2.52651896" z3="-2.65860522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.51443254" y3="2.42062427" z3="-3.45327215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87161764" y3="3.480422" z3="-2.58838699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.87006896" y3="3.29449391" z3="-4.00644677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58284883" y3="3.89748676" z3="-0.25258705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77273401" y3="5.04949388" z3="-0.03077343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94121092" y3="3.94086214" z3="0.17073656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47373905" y3="5.07783484" z3="0.72936737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5654264" y3="3.05285439" z3="0.05482043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51997552" y3="5.08514779" z3="1.04799629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35619107" y3="6.21586196" z3="0.53684123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67902892" y3="6.2362632" z3="0.90332989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72480124" y3="7.09680943" z3="0.68817369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11636086" y3="7.13697327" z3="1.34291005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32692861" y3="-3.9806926" z3="-2.87134106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51402105" y3="-5.00950649" z3="-2.52722229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19258356" y3="-3.66847221" z3="-3.48616746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44441847" y3="-3.9885657" z3="-3.53065719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6837935" y3="-1.62940424" z3="-2.12852549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41728109" y3="-1.16835962" z3="-2.81542386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52587285" y3="-0.95275359" z3="-1.2732267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72913177" y3="-1.67986242" z3="-2.67769034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8954,-.9579,-.7077;6.5607,-1.956,-1.6065;6.0465,-1.0013,-1.4603;4.7513,1.4747,-1.0878;4.27,.3094,-.5163;2.6375,2.7464,-1.1303;3.9922,2.7353,-.8496;2.3855,4.9964,-.3257;1.8011,3.8627,-.8393;1.7668,5.8726,-.1081;2.0568,1.627,-1.6526;3.1222,.361,.2206;1.6946,.3945,-.614;.606,.7418,.3332;1.6277,-.8424,-1.4818;1.0958,-2.4725,-1.3045;2.1363,-5.5164,-6.216;1.8462,-5.0777,-5.2571;1.0899,-3.926,-2.822;1.8069,-3.6967,-5.1175;1.5342,-5.8995,-4.1711;1.1708,-5.3176,-2.9634;1.4373,-3.0889,-3.9068;2.0565,-3.033,-5.949;1.5883,-6.9876,-4.2581;.9674,-5.9473,-2.0931;.6673,-3.3723,-1.5867;-.3351,-3.8579,-.8464;-.6687,-4.8647,-1.1118;-.3824,-3.5489,.6001;-.4184,-3.0626,3.3564;-.6817,-4.5822,1.4963;-.1226,-2.2676,1.0952;-.1365,-2.0268,2.4646;-.6914,-4.3409,2.8689;-.8653,-5.5926,1.1206;.0787,-1.429,.4273;.0823,-1.0157,2.8184;-.8912,-5.1633,3.5602;-.4189,-2.877,4.4344;1.3882,-1.7532,-3.8862;1.4881,-1.3389,-2.9837;.328,3.7322,-.9792;-2.1209,-3.0117,-1.7245;-2.9152,-3.1689,-.5846;-3.1163,-2.277,.3285;-3.8477,-.7055,.5529;-4.6414,-.2144,-1.0644;-2.5432,.4432,1.2092;-5.149,-1.0384,1.8507;-3.3987,-4.3741,-.33;-4.1133,-4.5943,.8774;-3.9135,.1294,-1.8178;-5.3406,.6236,-.8844;-5.2226,-1.0505,-1.5009;-1.6541,.5761,.5677;-2.1827,.0907,2.1897;-3.0129,1.4359,1.352;-5.6128,-.0868,2.1649;-5.9542,-1.6936,1.4741;-4.706,-1.5101,2.7447;-5.0517,-4.0155,.884;-3.5009,-4.3201,1.7517;-4.3396,-5.67,.8937;4.2682,-2.1989,-.1825;4.1341,-3.3093,-1.0288;3.5017,-4.4687,-.5962;3.0049,-4.5119,.7008;3.1463,-3.4411,1.5785;3.7724,-2.2856,1.1286;4.4878,-3.2491,-2.0613;3.3682,-5.3194,-1.2649;2.2736,-5.699,1.1453;2.7414,-3.5124,2.589;3.8613,-1.4301,1.7993;-.486,4.017,.126;-1.8591,3.8162,.0738;-2.4158,3.332,-1.1057;-1.6408,3.0704,-2.2334;-.2676,3.2666,-2.1607;-.026,4.3541,1.0585;-2.4959,4.0092,.9379;-3.8549,3.0616,-1.1553;-2.115,2.7042,-3.145;.3549,3.0358,-3.0271;2.1816,-5.8978,2.3356;1.7823,-6.4128,.2899;-4.3556,2.8358,-2.2381;-4.4692,3.063,-.1063;6.576,.1572,-2.0853;5.9077,1.4062,-1.931;7.7373,.0826,-2.9031;8.2028,1.189,-3.5693;8.2472,-.8806,-3.0028;9.0929,1.1191,-4.2007;6.3983,2.5265,-2.6586;7.5144,2.4206,-3.4533;5.8716,3.4804,-2.5884;7.8701,3.2945,-4.0064;4.5828,3.8975,-.2526;3.7727,5.0495,-.0308;5.9412,3.9409,.1707;6.4737,5.0778,.7294;6.5654,3.0529,.0548;7.52,5.0851,1.048;4.3562,6.2159,.5368;5.679,6.2363,.9033;3.7248,7.0968,.6882;6.1164,7.137,1.3429;-2.3269,-3.9807,-2.8713;-2.514,-5.0095,-2.5272;-3.1926,-3.6685,-3.4862;-1.4444,-3.9886,-3.5307;-1.6838,-1.6294,-2.1285;-2.4173,-1.1684,-2.8154;-1.5259,-.9528,-1.2732;-.7291,-1.6799,-2.6777;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662815287051</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007376240359 0.000765680791 0.022668568665 0.005336939198</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045206858 -0.003521490 0.000135246 0.000210004 0.000298000 0.000333847 0.000367483 0.000419935 0.000499710 0.000634681 0.000681199 0.000796818 0.000806281 0.001070578 0.001138723 0.001199422 0.001251978 0.001301656 0.001389174 0.001450590 0.001496370 0.001756627 0.001907987 0.002137685 0.002203629 0.002600254 0.002916567 0.003270570 0.003478733 0.003963486 0.004078811 0.004316637 0.004690011 0.004764864 0.005019834 0.005614245 0.005780724 0.006200853 0.006740564 0.006825224 0.007399214 0.007782599 0.008339867 0.008858831 0.009244780 0.010010616 0.010248387 0.010829171 0.011566250 0.012801766 0.012912630 0.013316394 0.014282882 0.014465146 0.014857074 0.015320257 0.015633454 0.016026787 0.016310012 0.016399515 0.017440234 0.017956580 0.018892962 0.019404052 0.020398471 0.021293484 0.022213262 0.022418276 0.023039930 0.023414266 0.024580262 0.025952117 0.026276766 0.026673869 0.027194563 0.027781294 0.029597954 0.029829743 0.030426215 0.031771320 0.032461613 0.032757066 0.036697935 0.038312275 0.039447090 0.040431165 0.040999759 0.042615050 0.043381280 0.045259349 0.046156083 0.048509157 0.049669400 0.050687616 0.051368914 0.051571059 0.051810962 0.052281735 0.052388165 0.052568455 0.053812233 0.054735943 0.055284069 0.056493284 0.056837396 0.056961695 0.057227558 0.057732257 0.058552930 0.059219668 0.060423430 0.060499238 0.061203547 0.062044883 0.062343377 0.063659443 0.063932922 0.064616288 0.065389096 0.065947950 0.067914923 0.068562562 0.070320566 0.071893674 0.072664161 0.074309738 0.076494674 0.078446215 0.080666124 0.082287904 0.085980492 0.087356401 0.089485505 0.090841002 0.092845075 0.093414541 0.094263425 0.095265511 0.095595145 0.096496314 0.097200085 0.097562404 0.099449834 0.100384328 0.101243389 0.102584851 0.102782386 0.103738851 0.104159032 0.106956294 0.107628390 0.108929905 0.110297130 0.110460836 0.111090692 0.112567368 0.113942884 0.116151894 0.116521207 0.117357733 0.120212288 0.122229021 0.123162230 0.126588886 0.127701034 0.128973352 0.131442680 0.133417300 0.135276451 0.136961858 0.140981997 0.142166921 0.144538626 0.145773199 0.146951175 0.151430250 0.152554942 0.157387981 0.165353508 0.170517527 0.174354470 0.176272461 0.180555535 0.183231333 0.185631654 0.187560370 0.188433284 0.189263591 0.196717826 0.198727135 0.201828186 0.205275181 0.205407930 0.206807748 0.207159830 0.209078629 0.210922965 0.212860379 0.215693570 0.220839576 0.224832924 0.231518111 0.231668804 0.232822038 0.233729039 0.235141735 0.244549086 0.249307856 0.254587109 0.255357531 0.256710606 0.258829291 0.271376475 0.277681094 0.290044503 0.296257061 0.298271145 0.299481120 0.304294297 0.306225055 0.307545444 0.317154871 0.320582575 0.322789065 0.327239427 0.328949823 0.346011093 0.350621536 0.354477575 0.354751267 0.359235318 0.363854535 0.381952889 0.392560631 0.405593496 0.412344850 0.420567555 0.430139018 0.430912263 0.445186254 0.463892116 0.464025837 0.477882201 0.478110453 0.483617225 0.492080043 0.498029876 0.510780960 0.542520188 0.565091108 0.566775445 0.582864760 0.583762291 0.604404770 0.636357444 0.643896313 0.664047294 0.665911110 0.672263809 0.681400198 0.691731640 0.698833477 0.704241426 0.705309618 0.714518822 0.723664059 0.736455439 0.737430419 0.750680627 0.771579117 0.775843676 0.801793379 0.816787831 0.819870370 0.820653501 0.831221125 0.840082688 0.841148202 0.846061423 0.849064325 0.850649099 0.858272030 0.861378876 0.864390604 0.867344932 0.872263514 0.875906687 0.889039467 0.890243646 0.891030303 0.893822366 0.917526244 0.920592652 0.923906074 0.930361884 0.933643351 0.938966607 0.958457511 0.962173123 0.969539732 0.975915183 0.989273225 0.999623812 1.013063119 1.034061049 1.042624259 1.049310171 1.055255124 1.075634930 1.084207671 1.088667523 1.109992176 1.110587189 1.116328478 1.122412577 1.123320562 1.134180010 1.142958118 1.161232964 1.168762957 1.172633576 1.173257748 1.200411166 1.204361068 1.216197187 1.247298251 1.294079842 1.295713544 1.312735997 1.316499933 1.326281838 1.326933109 1.330138121 1.334494765 1.340980640 1.345993619 1.362273488 1.378768409 1.380787277 1.381166131 1.382594244 1.446755814 1.557480371 1.671857385 1.825690988</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">75</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8934118" y3="-0.9580645" z3="-0.70721836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55761983" y3="-1.95718893" z3="-1.60710647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04352025" y3="-1.00226648" z3="-1.46131001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7490506" y3="1.47425827" z3="-1.0897582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26853294" y3="0.30960346" z3="-0.516212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63554031" y3="2.74719787" z3="-1.12715704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99115281" y3="2.73551128" z3="-0.85047194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38658615" y3="4.99742783" z3="-0.32173749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80034664" y3="3.86383546" z3="-0.8332729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76867139" y3="5.87374914" z3="-0.10227861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05276978" y3="1.62826541" z3="-1.64822733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12209593" y3="0.36215936" z3="0.22274854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6928079" y3="0.39559439" z3="-0.6091123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60611559" y3="0.74237877" z3="0.3404998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62426251" y3="-0.84123256" z3="-1.47712393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09676378" y3="-2.47263399" z3="-1.30106274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.14594004" y3="-5.51364849" z3="-6.21278655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.85432857" y3="-5.07550727" z3="-5.25401188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09418226" y3="-3.92533099" z3="-2.81957058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.81408302" y3="-3.6946582" z3="-5.11387533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.54139142" y3="-5.89806651" z3="-4.16882251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17601033" y3="-5.31680546" z3="-2.96133378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.44262294" y3="-3.08745263" z3="-3.90340988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06430286" y3="-3.03045852" z3="-5.94476796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59619709" y3="-6.98606634" z3="-4.25616338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97171533" y3="-5.94701462" z3="-2.09161666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66920953" y3="-3.37242259" z3="-1.58455341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33122896" y3="-3.86174498" z3="-0.84496571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66593868" y3="-4.8669148" z3="-1.11238138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38371201" y3="-3.55018376" z3="0.60056177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42288732" y3="-3.06263369" z3="3.35665165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68321372" y3="-4.58403589" z3="1.49687177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12608127" y3="-2.26770893" z3="1.09533708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14163361" y3="-2.02622102" z3="2.46468603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69398279" y3="-4.34230636" z3="2.8695022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86407354" y3="-5.59630541" z3="1.12192747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07719431" y3="-1.42992504" z3="0.4281981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07657991" y3="-1.01467849" z3="2.81814622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89199195" y3="-5.16579879" z3="3.56160721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42347311" y3="-2.87726682" z3="4.43479298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39320348" y3="-1.75196505" z3="-3.88252397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4899657" y3="-1.33755142" z3="-2.97943907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32680261" y3="3.73409933" z3="-0.96988447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.122254" y3="-3.0128112" z3="-1.72939776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91459273" y3="-3.17064372" z3="-0.58948322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1182509" y3="-2.27389241" z3="0.32047199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84252914" y3="-0.70557315" z3="0.54727025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62957878" y3="-0.20965351" z3="-1.06931692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54879571" y3="0.44127109" z3="1.20033576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15997675" y3="-1.0369663" z3="1.83899272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.3934504" y3="-4.3810202" z3="-0.32867554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11351922" y3="-4.59594069" z3="0.8750189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.90339709" y3="0.12873829" z3="-1.81947537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.32679789" y3="0.62859473" z3="-0.89382334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.20800225" y3="-1.04125345" z3="-1.50235667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65647151" y3="0.57113708" z3="0.55971063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19078981" y3="0.08438328" z3="2.18292139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01591027" y3="1.42987631" z3="1.35118244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63551664" y3="-0.08750664" z3="2.14880648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95468853" y3="-1.69923765" z3="1.45459344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.72146732" y3="-1.50049725" z3="2.74084364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05085181" y3="-4.01586805" z3="0.87778808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50516745" y3="-4.32257965" z3="1.75054677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34140892" y3="-5.66972184" z3="0.89017512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26669953" y3="-2.19859336" z3="-0.1804467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13387857" y3="-3.31022781" z3="-1.02530144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50199503" y3="-4.46951891" z3="-0.59159746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0041281" y3="-4.51133711" z3="0.70505172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14436992" y3="-3.43925009" z3="1.58139084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77022602" y3="-2.28405416" z3="1.13048629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48815731" y3="-3.2513514" z3="-2.0577103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36968915" y3="-5.32122536" z3="-1.25932986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27298863" y3="-5.69827866" z3="1.15031171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73882103" y3="-3.5094634" z3="2.5917732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85835177" y3="-1.42777418" z3="1.8003318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48465727" y3="4.01472184" z3="0.13724879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85842485" y3="3.8160893" z3="0.08636059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41778562" y3="3.33815626" z3="-1.09358281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64476866" y3="3.07934132" z3="-2.22262207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27113205" y3="3.27306097" z3="-2.15155484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0226204" y3="4.34687686" z3="1.07034036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49276349" y3="4.00401236" z3="0.95363302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85697385" y3="3.06824948" z3="-1.14146204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12128267" y3="2.71759896" z3="-3.13482865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34957702" y3="3.04511695" z3="-3.01998368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18079756" y3="-5.89625941" z3="2.34084679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78200024" y3="-6.41268585" z3="0.2952636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35634263" y3="2.84591977" z3="-2.22114897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46862971" y3="3.05880477" z3="-0.08748363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57214051" y3="0.15536415" z3="-2.08852096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90399907" y3="1.4045947" z3="-1.93489501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73223035" y3="0.07966909" z3="-2.90799549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.19659953" y3="1.18514553" z3="-3.57646247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2419564" y3="-0.88363045" z3="-3.00708567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0857503" y3="1.11445397" z3="-4.20909816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39338336" y3="2.52389327" z3="-2.6648838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5082972" y3="2.41693177" z3="-3.46112957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86673028" y3="3.47787649" z3="-2.59515058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.86300153" y3="3.29003645" z3="-4.01610954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58413205" y3="3.89789078" z3="-0.25586531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77502042" y3="5.05035079" z3="-0.03187239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94405521" y3="3.94128183" z3="0.16268935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47895041" y3="5.07879141" z3="0.71812421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56771699" y3="3.05296997" z3="0.04550942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52644141" y3="5.0861545" z3="1.0327858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36082893" y3="6.21717332" z3="0.53248343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68514751" y3="6.23771007" z3="0.89381372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73012103" y3="7.09846234" z3="0.68530895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12436821" y3="7.13890156" z3="1.33064085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32394923" y3="-3.98519506" z3="-2.87475829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50985859" y3="-5.01390996" z3="-2.5290963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18894359" y3="-3.67483791" z3="-3.49125744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44035331" y3="-3.99276164" z3="-3.53260556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68207395" y3="-1.63231168" z3="-2.13260482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41365574" y3="-1.16979185" z3="-2.81804572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52511964" y3="-0.95739651" z3="-1.27661218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72789553" y3="-1.68193667" z3="-2.68083579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8934,-.9581,-.7072;6.5576,-1.9572,-1.6071;6.0435,-1.0023,-1.4613;4.7491,1.4743,-1.0898;4.2685,.3096,-.5162;2.6355,2.7472,-1.1272;3.9912,2.7355,-.8505;2.3866,4.9974,-.3217;1.8003,3.8638,-.8333;1.7687,5.8737,-.1023;2.0528,1.6283,-1.6482;3.1221,.3622,.2227;1.6928,.3956,-.6091;.6061,.7424,.3405;1.6243,-.8412,-1.4771;1.0968,-2.4726,-1.3011;2.1459,-5.5136,-6.2128;1.8543,-5.0755,-5.254;1.0942,-3.9253,-2.8196;1.8141,-3.6947,-5.1139;1.5414,-5.8981,-4.1688;1.176,-5.3168,-2.9613;1.4426,-3.0875,-3.9034;2.0643,-3.0305,-5.9448;1.5962,-6.9861,-4.2562;.9717,-5.947,-2.0916;.6692,-3.3724,-1.5846;-.3312,-3.8617,-.845;-.6659,-4.8669,-1.1124;-.3837,-3.5502,.6006;-.4229,-3.0626,3.3567;-.6832,-4.584,1.4969;-.1261,-2.2677,1.0953;-.1416,-2.0262,2.4647;-.694,-4.3423,2.8695;-.8641,-5.5963,1.1219;.0772,-1.4299,.4282;.0766,-1.0147,2.8181;-.892,-5.1658,3.5616;-.4235,-2.8773,4.4348;1.3932,-1.752,-3.8825;1.49,-1.3376,-2.9794;.3268,3.7341,-.9699;-2.1223,-3.0128,-1.7294;-2.9146,-3.1706,-.5895;-3.1183,-2.2739,.3205;-3.8425,-.7056,.5473;-4.6296,-.2097,-1.0693;-2.5488,.4413,1.2003;-5.16,-1.037,1.839;-3.3935,-4.381,-.3287;-4.1135,-4.5959,.875;-3.9034,.1287,-1.8195;-5.3268,.6286,-.8938;-5.208,-1.0413,-1.5024;-1.6565,.5711,.5597;-2.1908,.0844,2.1829;-3.0159,1.4299,1.3512;-5.6355,-.0875,2.1488;-5.9547,-1.6992,1.4546;-4.7215,-1.5005,2.7408;-5.0509,-4.0159,.8778;-3.5052,-4.3226,1.7505;-4.3414,-5.6697,.8902;4.2667,-2.1986,-.1804;4.1339,-3.3102,-1.0253;3.502,-4.4695,-.5916;3.0041,-4.5113,.7051;3.1444,-3.4393,1.5814;3.7702,-2.2841,1.1305;4.4882,-3.2514,-2.0577;3.3697,-5.3212,-1.2593;2.273,-5.6983,1.1503;2.7388,-3.5095,2.5918;3.8584,-1.4278,1.8003;-.4847,4.0147,.1372;-1.8584,3.8161,.0864;-2.4178,3.3382,-1.0936;-1.6448,3.0793,-2.2226;-.2711,3.2731,-2.1516;-.0226,4.3469,1.0703;-2.4928,4.004,.9536;-3.857,3.0682,-1.1415;-2.1213,2.7176,-3.1348;.3496,3.0451,-3.02;2.1808,-5.8963,2.3408;1.782,-6.4127,.2953;-4.3563,2.8459,-2.2211;-4.4686,3.0588,-.0875;6.5721,.1554,-2.0885;5.904,1.4046,-1.9349;7.7322,.0797,-2.908;8.1966,1.1851,-3.5765;8.242,-.8836,-3.0071;9.0858,1.1145,-4.2091;6.3934,2.5239,-2.6649;7.5083,2.4169,-3.4611;5.8667,3.4779,-2.5952;7.863,3.29,-4.0161;4.5841,3.8979,-.2559;3.775,5.0504,-.0319;5.9441,3.9413,.1627;6.479,5.0788,.7181;6.5677,3.053,.0455;7.5264,5.0862,1.0328;4.3608,6.2172,.5325;5.6851,6.2377,.8938;3.7301,7.0985,.6853;6.1244,7.1389,1.3306;-2.3239,-3.9852,-2.8748;-2.5099,-5.0139,-2.5291;-3.1889,-3.6748,-3.4913;-1.4404,-3.9928,-3.5326;-1.6821,-1.6323,-2.1326;-2.4137,-1.1698,-2.818;-1.5251,-.9574,-1.2766;-.7279,-1.6819,-2.6808;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662785921200</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008382601828 0.000886805856 0.030474499337 0.005338136750</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045414163 -0.004036124 0.000137134 0.000210970 0.000299000 0.000333670 0.000367441 0.000419781 0.000500328 0.000635430 0.000680923 0.000801774 0.000808018 0.001071283 0.001144421 0.001204103 0.001251807 0.001301130 0.001388509 0.001450173 0.001497669 0.001756725 0.001907538 0.002155500 0.002216397 0.002599773 0.002921862 0.003282843 0.003504706 0.003962875 0.004295869 0.004515726 0.004682046 0.004976630 0.005019503 0.005632207 0.005782164 0.006201721 0.006772999 0.007394795 0.007526032 0.007791348 0.008338824 0.008856601 0.009260957 0.010012674 0.010248905 0.010982401 0.011584822 0.012828400 0.012927449 0.013460844 0.014318997 0.014470117 0.014857975 0.015323822 0.015636131 0.016026738 0.016324094 0.016403015 0.017442566 0.017969366 0.018924400 0.019411458 0.020402129 0.021306791 0.022217169 0.022433671 0.023040600 0.023431815 0.024584117 0.025955550 0.026288732 0.026674114 0.027197911 0.027781730 0.029797518 0.029831780 0.030426205 0.031771605 0.032531779 0.032757622 0.036800061 0.038362775 0.039510048 0.040463545 0.040999864 0.042873696 0.043601962 0.045259360 0.046158206 0.048635792 0.049669412 0.050688527 0.051374672 0.051574358 0.051811648 0.052281761 0.052388361 0.052568830 0.053820135 0.054741866 0.055766901 0.056493282 0.056838151 0.056972170 0.057227344 0.057743334 0.058566256 0.059220153 0.060424090 0.060498780 0.061194505 0.062063297 0.062365316 0.063672055 0.063948813 0.064616799 0.065394815 0.065951028 0.067914993 0.068563533 0.070398970 0.071896578 0.072664396 0.074508175 0.076497899 0.078462269 0.080666589 0.082292986 0.086129063 0.087364004 0.089485463 0.090840997 0.092845376 0.093414263 0.094300890 0.095266983 0.095596752 0.096498887 0.097265513 0.097560514 0.099450751 0.100403015 0.101251275 0.102587988 0.102785225 0.103817980 0.104350304 0.106964931 0.107728228 0.108931956 0.110306926 0.110520333 0.111109254 0.112567258 0.113996549 0.116230266 0.116532990 0.117357835 0.120482726 0.122385419 0.123182447 0.126609971 0.127731827 0.129033456 0.131442604 0.133435634 0.135468468 0.136961575 0.141207254 0.142184635 0.144538501 0.145770681 0.146943555 0.151598480 0.152559463 0.157393786 0.165385403 0.170519466 0.174355370 0.176284806 0.180555255 0.183233668 0.185666561 0.187606257 0.188653431 0.190885095 0.196743584 0.199377443 0.201837324 0.205306538 0.205425612 0.206816040 0.207159910 0.209078629 0.210944209 0.212882765 0.215705231 0.220875286 0.224836679 0.231519144 0.231895745 0.232868940 0.233739194 0.235155344 0.244562444 0.249326945 0.254592770 0.255362174 0.256710652 0.258842138 0.271377315 0.277686903 0.290053658 0.296269566 0.298276476 0.299481617 0.304295237 0.306225723 0.307545589 0.317162604 0.320584995 0.322796895 0.327240004 0.328952971 0.346012774 0.350624730 0.354632249 0.354752059 0.359242631 0.363854654 0.381951993 0.392724289 0.405596996 0.414612649 0.420761938 0.430149025 0.431197383 0.445245314 0.463899761 0.464044140 0.477883566 0.478184747 0.483618187 0.492325202 0.498031484 0.510805266 0.542522608 0.565094366 0.566775583 0.582874421 0.583774485 0.604405157 0.636687447 0.643899094 0.664691548 0.666000541 0.672272792 0.681400402 0.691744180 0.698838294 0.704241425 0.705313054 0.714518961 0.724179183 0.736805841 0.737544622 0.750680746 0.771579118 0.775843726 0.801859327 0.816788212 0.819870413 0.820653589 0.831222240 0.840084856 0.841160044 0.846190916 0.849138195 0.853004234 0.858271987 0.861435124 0.864403247 0.867344963 0.872263688 0.875912431 0.889044325 0.890264898 0.891059766 0.893828794 0.917748987 0.920698713 0.923907447 0.930599831 0.934838357 0.939063479 0.958461451 0.962514259 0.969616435 0.975943974 0.989283000 0.999625252 1.013089525 1.034064646 1.042626501 1.049320112 1.055255267 1.075745246 1.084210681 1.088667520 1.109992468 1.110587211 1.116345984 1.122412679 1.123320551 1.134221083 1.143090668 1.161233963 1.168763663 1.172649846 1.173260254 1.200411422 1.204368033 1.216201444 1.247299936 1.294252574 1.295720159 1.312735453 1.316500041 1.326283083 1.326941813 1.330138154 1.334499679 1.341007508 1.345999706 1.362279387 1.378768333 1.380798377 1.381173722 1.382682309 1.446770362 1.557480865 1.671858724 1.829509055</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">76</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89189533" y3="-0.95787793" z3="-0.70632072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55519263" y3="-1.95796607" z3="-1.60687627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04114254" y3="-1.0029228" z3="-1.46167426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74722764" y3="1.47421425" z3="-1.0913352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26752868" y3="0.31016018" z3="-0.515754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63402997" y3="2.74806267" z3="-1.12416436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99036612" y3="2.73603019" z3="-0.85121697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38790112" y3="4.99861211" z3="-0.31915464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80004871" y3="3.86495987" z3="-0.82854317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77087253" y3="5.8751356" z3="-0.09820613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04946181" y3="1.62946166" z3="-1.64366644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1224613" y3="0.36370069" z3="0.22521479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69182802" y3="0.39638398" z3="-0.60416611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60656816" y3="0.74240827" z3="0.34735304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62229298" y3="-0.8401082" z3="-1.47237773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09715105" y3="-2.47258988" z3="-1.29841258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.15330024" y3="-5.50992612" z3="-6.21085218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.86074259" y3="-5.07262842" z3="-5.25200399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09772847" y3="-3.92454239" z3="-2.81733639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.8197012" y3="-3.69190641" z3="-5.11089116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.54735606" y3="-5.89608852" z3="-4.16764973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18060025" y3="-5.31586669" z3="-2.96010285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.44686479" y3="-3.08578123" z3="-3.90033633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07024444" y3="-3.02701631" z3="-5.94112415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60289579" y3="-6.98399361" z3="-4.25567936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9758663" y3="-5.94675653" z3="-2.0909641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67135457" y3="-3.37302098" z3="-1.58239309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33182389" y3="-3.86115999" z3="-0.84492839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66322651" y3="-4.8683902" z3="-1.11172559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38419758" y3="-3.55165327" z3="0.60124006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42712387" y3="-3.06442729" z3="3.35728493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68439318" y3="-4.58539179" z3="1.49699654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12694002" y3="-2.26991324" z3="1.09669805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14451858" y3="-2.02838231" z3="2.46595747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69727889" y3="-4.343606" z3="2.869518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86543944" y3="-5.59642733" z3="1.12126054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07574225" y3="-1.43138941" z3="0.42910367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07218564" y3="-1.01650313" z3="2.81959185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8970207" y3="-5.16649778" z3="3.5604795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42985188" y3="-2.87847051" z3="4.43526091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39691669" y3="-1.75026123" z3="-3.87850264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49168488" y3="-1.33647801" z3="-2.97512554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32621386" y3="3.73555697" z3="-0.96204005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11758495" y3="-3.01751139" z3="-1.72923294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91418847" y3="-3.17217081" z3="-0.59057206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1201603" y3="-2.27636929" z3="0.318635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84950883" y3="-0.70433982" z3="0.54258709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62668769" y3="-0.20575969" z3="-1.07801087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54526458" y3="0.4354747" z3="1.20791206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16959776" y3="-1.03826321" z3="1.82529517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39510601" y3="-4.37901444" z3="-0.33278633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11453302" y3="-4.59702599" z3="0.87174645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.88334148" y3="0.15203794" z3="-1.81728266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33473651" y3="0.62434153" z3="-0.89757556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.19152956" y3="-1.0455874" z3="-1.53283117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65233411" y3="0.56710024" z3="0.57005334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1916032" y3="0.07205092" z3="2.1887678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01022782" y3="1.43050565" z3="1.35315521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.64149906" y3="-0.08612405" z3="2.13060952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96851869" y3="-1.69506169" z3="1.43655671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.73921972" y3="-1.50972453" z3="2.72783382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05212026" y3="-4.01745874" z3="0.87502667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50598624" y3="-4.32470493" z3="1.7475674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34273498" y3="-5.67074519" z3="0.88653794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26565801" y3="-2.19807171" z3="-0.17812998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1339342" y3="-3.31071074" z3="-1.02179042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50243044" y3="-4.46983947" z3="-0.58721743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00369974" y3="-4.5105856" z3="0.7090811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14286539" y3="-3.43754031" z3="1.58433489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76848881" y3="-2.28250977" z3="1.13262762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4886154" y3="-3.25278892" z3="-2.05409724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37091185" y3="-5.32220961" z3="-1.25412816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2724874" y3="-5.69725372" z3="1.15480536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73654808" y3="-3.50676668" z3="2.59447676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85580693" y3="-1.42563542" z3="1.80173446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48344128" y3="4.0143712" z3="0.14645284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8567913" y3="3.81465568" z3="0.09836558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41792327" y3="3.33796189" z3="-1.08012745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64722943" y3="3.08250055" z3="-2.21134991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27380578" y3="3.27674592" z3="-2.14283142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02066265" y3="4.34668314" z3="1.077548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4906054" y3="4.00303501" z3="0.96445717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85727964" y3="3.06987982" z3="-1.12548549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12472292" y3="2.7222582" z3="-3.12223009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34583913" y3="3.05025149" z3="-3.01184199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17963899" y3="-5.89434206" z3="2.34539575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78199483" y3="-6.41229503" z3="0.30001949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36317766" y3="2.85864415" z3="-2.20885531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46728761" y3="3.06025523" z3="-0.07493376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56883891" y3="0.15388959" z3="-2.09109641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90073308" y3="1.40327854" z3="-1.93843594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72794005" y3="0.07704222" z3="-2.91184688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.19130883" y3="1.18150089" z3="-3.58266711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23769864" y3="-0.88634164" z3="-3.0099557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0797368" y3="1.1099468" z3="-4.21620292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38890871" y3="2.52137411" z3="-2.67108016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.50281958" y3="2.41328987" z3="-3.46858511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86213706" y3="3.47534857" z3="-2.60233326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.85661608" y3="3.28551419" z3="-4.0255264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58537088" y3="3.89883092" z3="-0.25943877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77720629" y3="5.05155873" z3="-0.03389544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94666965" y3="3.94267109" z3="0.15440192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48366838" y3="5.08090504" z3="0.7062641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56984202" y3="3.0542173" z3="0.03624654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53227549" y3="5.08864966" z3="1.01699373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36509893" y3="6.21902459" z3="0.52687652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6906885" y3="6.24008224" z3="0.88318966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73503116" y3="7.10049392" z3="0.68074687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13158423" y3="7.1418945" z3="1.31699868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32019477" y3="-3.98840347" z3="-2.87516622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50776092" y3="-5.01644833" z3="-2.53072529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18394346" y3="-3.67720941" z3="-3.49221078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43624123" y3="-3.99701884" z3="-3.53273399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67962207" y3="-1.63577436" z3="-2.13489188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41271673" y3="-1.17591538" z3="-2.82401499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52227336" y3="-0.95722718" z3="-1.28074182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72781852" y3="-1.68559355" z3="-2.68491641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8919,-.9579,-.7063;6.5552,-1.958,-1.6069;6.0411,-1.0029,-1.4617;4.7472,1.4742,-1.0913;4.2675,.3102,-.5158;2.634,2.7481,-1.1242;3.9904,2.736,-.8512;2.3879,4.9986,-.3192;1.8,3.865,-.8285;1.7709,5.8751,-.0982;2.0495,1.6295,-1.6437;3.1225,.3637,.2252;1.6918,.3964,-.6042;.6066,.7424,.3474;1.6223,-.8401,-1.4724;1.0972,-2.4726,-1.2984;2.1533,-5.5099,-6.2109;1.8607,-5.0726,-5.252;1.0977,-3.9245,-2.8173;1.8197,-3.6919,-5.1109;1.5474,-5.8961,-4.1676;1.1806,-5.3159,-2.9601;1.4469,-3.0858,-3.9003;2.0702,-3.027,-5.9411;1.6029,-6.984,-4.2557;.9759,-5.9468,-2.091;.6714,-3.373,-1.5824;-.3318,-3.8612,-.8449;-.6632,-4.8684,-1.1117;-.3842,-3.5517,.6012;-.4271,-3.0644,3.3573;-.6844,-4.5854,1.497;-.1269,-2.2699,1.0967;-.1445,-2.0284,2.466;-.6973,-4.3436,2.8695;-.8654,-5.5964,1.1213;.0757,-1.4314,.4291;.0722,-1.0165,2.8196;-.897,-5.1665,3.5605;-.4299,-2.8785,4.4353;1.3969,-1.7503,-3.8785;1.4917,-1.3365,-2.9751;.3262,3.7356,-.962;-2.1176,-3.0175,-1.7292;-2.9142,-3.1722,-.5906;-3.1202,-2.2764,.3186;-3.8495,-.7043,.5426;-4.6267,-.2058,-1.078;-2.5453,.4355,1.2079;-5.1696,-1.0383,1.8253;-3.3951,-4.379,-.3328;-4.1145,-4.597,.8717;-3.8833,.152,-1.8173;-5.3347,.6243,-.8976;-5.1915,-1.0456,-1.5328;-1.6523,.5671,.5701;-2.1916,.0721,2.1888;-3.0102,1.4305,1.3532;-5.6415,-.0861,2.1306;-5.9685,-1.6951,1.4366;-4.7392,-1.5097,2.7278;-5.0521,-4.0175,.875;-3.506,-4.3247,1.7476;-4.3427,-5.6707,.8865;4.2657,-2.1981,-.1781;4.1339,-3.3107,-1.0218;3.5024,-4.4698,-.5872;3.0037,-4.5106,.7091;3.1429,-3.4375,1.5843;3.7685,-2.2825,1.1326;4.4886,-3.2528,-2.0541;3.3709,-5.3222,-1.2541;2.2725,-5.6973,1.1548;2.7365,-3.5068,2.5945;3.8558,-1.4256,1.8017;-.4834,4.0144,.1465;-1.8568,3.8147,.0984;-2.4179,3.338,-1.0801;-1.6472,3.0825,-2.2113;-.2738,3.2767,-2.1428;-.0207,4.3467,1.0775;-2.4906,4.003,.9645;-3.8573,3.0699,-1.1255;-2.1247,2.7223,-3.1222;.3458,3.0503,-3.0118;2.1796,-5.8943,2.3454;1.782,-6.4123,.3;-4.3632,2.8586,-2.2089;-4.4673,3.0603,-.0749;6.5688,.1539,-2.0911;5.9007,1.4033,-1.9384;7.7279,.077,-2.9118;8.1913,1.1815,-3.5827;8.2377,-.8863,-3.01;9.0797,1.1099,-4.2162;6.3889,2.5214,-2.6711;7.5028,2.4133,-3.4686;5.8621,3.4753,-2.6023;7.8566,3.2855,-4.0255;4.5854,3.8988,-.2594;3.7772,5.0516,-.0339;5.9467,3.9427,.1544;6.4837,5.0809,.7063;6.5698,3.0542,.0362;7.5323,5.0886,1.017;4.3651,6.219,.5269;5.6907,6.2401,.8832;3.735,7.1005,.6807;6.1316,7.1419,1.317;-2.3202,-3.9884,-2.8752;-2.5078,-5.0164,-2.5307;-3.1839,-3.6772,-3.4922;-1.4362,-3.997,-3.5327;-1.6796,-1.6358,-2.1349;-2.4127,-1.1759,-2.824;-1.5223,-.9572,-1.2807;-.7278,-1.6856,-2.6849;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662767755859</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009187221718 0.000984285743 0.020334138908 0.005338305432</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045609872 -0.005002935 0.000154586 0.000212079 0.000306099 0.000336213 0.000367524 0.000420882 0.000500337 0.000639656 0.000689702 0.000805437 0.000839398 0.001072444 0.001189768 0.001214928 0.001259240 0.001304162 0.001426555 0.001468972 0.001498251 0.001757625 0.001911957 0.002164448 0.002223485 0.002656824 0.002924024 0.003283440 0.003506214 0.003976269 0.004311277 0.004494846 0.004788254 0.005002443 0.005092483 0.005633640 0.005783733 0.006201974 0.006775930 0.007396157 0.007777869 0.008327614 0.008397596 0.008966362 0.009289338 0.010012677 0.010248876 0.010990414 0.011620428 0.012831021 0.012934844 0.013525819 0.014348921 0.014489398 0.014863110 0.015323426 0.015636019 0.016027223 0.016375113 0.016458880 0.017445101 0.017979652 0.018962924 0.019462015 0.020409405 0.021362435 0.022255453 0.022434062 0.023045806 0.023460036 0.024591510 0.025961752 0.026313712 0.026674647 0.027207400 0.027782420 0.029764908 0.029834040 0.030426366 0.031786472 0.032538444 0.032757691 0.036798458 0.038373800 0.039527988 0.040459590 0.041000058 0.042845835 0.043726129 0.045259698 0.046158611 0.048624312 0.049669405 0.050688782 0.051375300 0.051574871 0.051813471 0.052281778 0.052388381 0.052569356 0.053828834 0.054742658 0.056493227 0.056685952 0.056852602 0.057168274 0.057273624 0.057793167 0.058602764 0.059221509 0.060426082 0.060506574 0.061237411 0.062071961 0.062382972 0.063671323 0.063954820 0.064616699 0.065394532 0.065951730 0.067915599 0.068569091 0.070558176 0.071900784 0.072664406 0.074817185 0.076501369 0.078476467 0.080666513 0.082295914 0.086144917 0.087371818 0.089485821 0.090841583 0.092846673 0.093416467 0.094326767 0.095269650 0.095600505 0.096508779 0.097280833 0.097584312 0.099455468 0.100416279 0.101254992 0.102588074 0.102793458 0.103867674 0.104615431 0.106981396 0.107779917 0.108932269 0.110307530 0.110652365 0.111153617 0.112567965 0.114119715 0.116304588 0.116546588 0.117359734 0.121005794 0.122380345 0.123179222 0.126608093 0.127751877 0.129039855 0.131462767 0.133451340 0.135509056 0.136962157 0.141319937 0.142184758 0.144538415 0.145812352 0.147083291 0.151767775 0.152558844 0.157423007 0.165409133 0.170519902 0.174355278 0.176292295 0.180556509 0.183237913 0.185665060 0.187619845 0.188678533 0.192325374 0.196806135 0.201125374 0.201882913 0.205352819 0.205506994 0.206823606 0.207159967 0.209078674 0.211035272 0.212915678 0.215707004 0.220885180 0.224839171 0.231522168 0.232564760 0.233395272 0.233798220 0.235197922 0.244566054 0.249325377 0.254608727 0.255361944 0.256711146 0.258842558 0.271378269 0.277719471 0.290058955 0.296287597 0.298287110 0.299483406 0.304296587 0.306233473 0.307545635 0.317179574 0.320590372 0.322815311 0.327239840 0.328962789 0.346018967 0.350627479 0.354623820 0.354753257 0.359251302 0.363854644 0.381966055 0.392778014 0.405605589 0.415636448 0.421983469 0.430173243 0.431653250 0.445286556 0.463922903 0.464068434 0.477884301 0.478364686 0.483618892 0.492526271 0.498032338 0.510852778 0.542527401 0.565097182 0.566775833 0.582886281 0.583783258 0.604405426 0.636719113 0.643900555 0.665293279 0.666936344 0.672309338 0.681403297 0.691749378 0.698840538 0.704241426 0.705313648 0.714519127 0.724648359 0.736810611 0.737558215 0.750680773 0.771579121 0.775844014 0.801860912 0.816789223 0.819873484 0.820654861 0.831222291 0.840163534 0.841351744 0.846260119 0.849137976 0.856569878 0.858310270 0.861448261 0.864419253 0.867345883 0.872265159 0.875969045 0.889150945 0.890343634 0.892178997 0.893860775 0.917799639 0.920934574 0.923908867 0.930688616 0.935436072 0.939099047 0.958468668 0.962588341 0.969650226 0.975953516 0.989285085 0.999625732 1.013103375 1.034065564 1.042628089 1.049327069 1.055255927 1.075765088 1.084211441 1.088667524 1.109992461 1.110587323 1.116349513 1.122412744 1.123320586 1.134248285 1.143167458 1.161233978 1.168763708 1.172666607 1.173260613 1.200411540 1.204370232 1.216211965 1.247299940 1.294260798 1.295724234 1.312787874 1.316552501 1.326283641 1.326947109 1.330138144 1.334499721 1.341009290 1.345999615 1.362280015 1.378768980 1.380814444 1.381190470 1.382795535 1.446769069 1.557481058 1.671858735 1.833752626</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">77</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89064593" y3="-0.95743338" z3="-0.70474158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55310166" y3="-1.95854001" z3="-1.60573187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03910798" y3="-1.00336706" z3="-1.46125486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74566846" y3="1.47416547" z3="-1.09270518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2666286" y3="0.31088022" z3="-0.51494886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63292616" y3="2.74853048" z3="-1.1223768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9898014" y3="2.73642835" z3="-0.85253328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38904635" y3="4.99961972" z3="-0.31824424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80002615" y3="3.86565002" z3="-0.82547795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77259328" y3="5.87620721" z3="-0.09599802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04634625" y3="1.63003111" z3="-1.6398838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12270767" y3="0.36544821" z3="0.22766537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69059488" y3="0.39753339" z3="-0.59926582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60693473" y3="0.74333126" z3="0.35407522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61970802" y3="-0.83929456" z3="-1.46707546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09754753" y3="-2.47213925" z3="-1.29528879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.16145154" y3="-5.50625499" z3="-6.20829398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.86770405" y3="-5.06975611" z3="-5.24940648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10118837" y3="-3.92368585" z3="-2.81485844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.82587857" y3="-3.68916033" z3="-5.10737603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55356533" y3="-5.89411039" z3="-4.16592392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18499444" y3="-5.31490438" z3="-2.95837437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4514703" y3="-3.084037" z3="-3.89676468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07701201" y3="-3.02353297" z3="-5.93683338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60982022" y3="-6.9819263" z3="-4.2547219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97953204" y3="-5.94654148" z3="-2.08995084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67255508" y3="-3.37270267" z3="-1.5802359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32974686" y3="-3.86282694" z3="-0.84380374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.661775" y3="-4.86876577" z3="-1.11208029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38586059" y3="-3.55252366" z3="0.60175952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43209494" y3="-3.06661479" z3="3.35790512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68806358" y3="-4.58619918" z3="1.49665227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12898032" y3="-2.27104283" z3="1.09796174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14775495" y3="-2.03052763" z3="2.46736259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7027187" y3="-4.34507906" z3="2.86918354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86862377" y3="-5.59735605" z3="1.12041935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07605604" y3="-1.4332587" z3="0.43147691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06976358" y3="-1.01978569" z3="2.82195416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90369713" y3="-5.16803202" z3="3.56000807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43614578" y3="-2.88141486" z3="4.43596268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40121789" y3="-1.7485916" z3="-3.87408876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49429299" y3="-1.33514678" z3="-2.97027119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32581807" y3="3.73599591" z3="-0.95540579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11935487" y3="-3.0174056" z3="-1.73244558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91577976" y3="-3.17379104" z3="-0.59496521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12188665" y3="-2.27972228" z3="0.31524286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84740135" y3="-0.70819015" z3="0.53688781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.61206213" y3="-0.20101173" z3="-1.09275591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54890745" y3="0.42970252" z3="1.21351782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.17513861" y3="-1.04040897" z3="1.81260005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39756643" y3="-4.38118932" z3="-0.33767193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11708895" y3="-4.59851665" z3="0.86669364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.88239184" y3="0.14915613" z3="-1.8283999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3208423" y3="0.62879389" z3="-0.91781988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.18007624" y3="-1.03072752" z3="-1.5409427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65188385" y3="0.56301946" z3="0.57971871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19793211" y3="0.06665994" z3="2.1943703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0132329" y3="1.41899818" z3="1.36648382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63902121" y3="-0.08693563" z3="2.11900338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97575836" y3="-1.69231374" z3="1.42218922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.74870378" y3="-1.51665389" z3="2.71088676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05400144" y3="-4.01827864" z3="0.87100169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50752422" y3="-4.3259477" z3="1.74232089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34543469" y3="-5.67263998" z3="0.8818872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26482163" y3="-2.19723591" z3="-0.17512661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13421924" y3="-3.31092966" z3="-1.01764052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50300532" y3="-4.46990396" z3="-0.58227949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00318685" y3="-4.50941781" z3="0.7136327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14138554" y3="-3.43542963" z3="1.58787786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7669356" y3="-2.28063315" z3="1.13544986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48950396" y3="-3.25402819" z3="-2.04980041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37245298" y3="-5.32311747" z3="-1.24836892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2716422" y3="-5.69569922" z3="1.15978419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73433873" y3="-3.50375325" z3="2.59778689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85349729" y3="-1.42316977" z3="1.80386098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48014015" y3="4.00999301" z3="0.15858394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85422177" y3="3.81196675" z3="0.11296814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42006493" y3="3.34359984" z3="-1.06966857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65222364" y3="3.09047267" z3="-2.20413564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27788448" y3="3.28194351" z3="-2.13747367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01248959" y3="4.33589133" z3="1.09246501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48466803" y3="3.9956171" z3="0.98479131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86087787" y3="3.07891115" z3="-1.11559492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13403544" y3="2.73592942" z3="-3.11757283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.33940016" y3="3.05772676" z3="-3.00968381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17762844" y3="-5.89157125" z3="2.35041572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78207287" y3="-6.41164223" z3="0.3051811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36680144" y3="2.87219999" z3="-2.1957514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46688081" y3="3.05716802" z3="-0.05781444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56588674" y3="0.15251738" z3="-2.09306612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89773076" y3="1.40199494" z3="-1.94163144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72397537" y3="0.07449613" z3="-2.91514797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18612058" y3="1.17783579" z3="-3.58862477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23388226" y3="-0.88892611" z3="-3.01209051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.07381106" y3="1.10539747" z3="-4.22311215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38441196" y3="2.51882371" z3="-2.67722234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.49725651" y3="2.40956951" z3="-3.47608174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85734912" y3="3.47272756" z3="-2.609628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.84993171" y3="3.28079384" z3="-4.03529551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58655179" y3="3.89989104" z3="-0.26372064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77915103" y3="5.05288866" z3="-0.03708504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94912014" y3="3.94441265" z3="0.14575445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48801009" y3="5.08355428" z3="0.69385146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57193667" y3="3.0558704" z3="0.02700951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53770268" y3="5.09188606" z3="1.00079558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36881746" y3="6.22115693" z3="0.52016406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6956383" y3="6.24293962" z3="0.8717196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73927795" y3="7.10282941" z3="0.67493961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13803476" y3="7.14549857" z3="1.30242667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31751091" y3="-3.99169192" z3="-2.87696914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50396056" y3="-5.02009189" z3="-2.53004017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18097265" y3="-3.68279052" z3="-3.49679198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43201637" y3="-4.00026715" z3="-3.5322142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67991348" y3="-1.6371219" z3="-2.13798681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4099342" y3="-1.17571255" z3="-2.82512458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52470817" y3="-0.96143922" z3="-1.28244437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7209748" y3="-1.68913059" z3="-2.68258256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8906,-.9574,-.7047;6.5531,-1.9585,-1.6057;6.0391,-1.0034,-1.4613;4.7457,1.4742,-1.0927;4.2666,.3109,-.5149;2.6329,2.7485,-1.1224;3.9898,2.7364,-.8525;2.389,4.9996,-.3182;1.8,3.8657,-.8255;1.7726,5.8762,-.096;2.0463,1.63,-1.6399;3.1227,.3654,.2277;1.6906,.3975,-.5993;.6069,.7433,.3541;1.6197,-.8393,-1.4671;1.0975,-2.4721,-1.2953;2.1615,-5.5063,-6.2083;1.8677,-5.0698,-5.2494;1.1012,-3.9237,-2.8149;1.8259,-3.6892,-5.1074;1.5536,-5.8941,-4.1659;1.185,-5.3149,-2.9584;1.4515,-3.084,-3.8968;2.077,-3.0235,-5.9368;1.6098,-6.9819,-4.2547;.9795,-5.9465,-2.09;.6726,-3.3727,-1.5802;-.3297,-3.8628,-.8438;-.6618,-4.8688,-1.1121;-.3859,-3.5525,.6018;-.4321,-3.0666,3.3579;-.6881,-4.5862,1.4967;-.129,-2.271,1.098;-.1478,-2.0305,2.4674;-.7027,-4.3451,2.8692;-.8686,-5.5974,1.1204;.0761,-1.4333,.4315;.0698,-1.0198,2.822;-.9037,-5.168,3.56;-.4361,-2.8814,4.436;1.4012,-1.7486,-3.8741;1.4943,-1.3351,-2.9703;.3258,3.736,-.9554;-2.1194,-3.0174,-1.7324;-2.9158,-3.1738,-.595;-3.1219,-2.2797,.3152;-3.8474,-.7082,.5369;-4.6121,-.201,-1.0928;-2.5489,.4297,1.2135;-5.1751,-1.0404,1.8126;-3.3976,-4.3812,-.3377;-4.1171,-4.5985,.8667;-3.8824,.1492,-1.8284;-5.3208,.6288,-.9178;-5.1801,-1.0307,-1.5409;-1.6519,.563,.5797;-2.1979,.0667,2.1944;-3.0132,1.419,1.3665;-5.639,-.0869,2.119;-5.9758,-1.6923,1.4222;-4.7487,-1.5167,2.7109;-5.054,-4.0183,.871;-3.5075,-4.3259,1.7423;-4.3454,-5.6726,.8819;4.2648,-2.1972,-.1751;4.1342,-3.3109,-1.0176;3.503,-4.4699,-.5823;3.0032,-4.5094,.7136;3.1414,-3.4354,1.5879;3.7669,-2.2806,1.1354;4.4895,-3.254,-2.0498;3.3725,-5.3231,-1.2484;2.2716,-5.6957,1.1598;2.7343,-3.5038,2.5978;3.8535,-1.4232,1.8039;-.4801,4.01,.1586;-1.8542,3.812,.113;-2.4201,3.3436,-1.0697;-1.6522,3.0905,-2.2041;-.2779,3.2819,-2.1375;-.0125,4.3359,1.0925;-2.4847,3.9956,.9848;-3.8609,3.0789,-1.1156;-2.134,2.7359,-3.1176;.3394,3.0577,-3.0097;2.1776,-5.8916,2.3504;1.7821,-6.4116,.3052;-4.3668,2.8722,-2.1958;-4.4669,3.0572,-.0578;6.5659,.1525,-2.0931;5.8977,1.402,-1.9416;7.724,.0745,-2.9151;8.1861,1.1778,-3.5886;8.2339,-.8889,-3.0121;9.0738,1.1054,-4.2231;6.3844,2.5188,-2.6772;7.4973,2.4096,-3.4761;5.8573,3.4727,-2.6096;7.8499,3.2808,-4.0353;4.5866,3.8999,-.2637;3.7792,5.0529,-.0371;5.9491,3.9444,.1458;6.488,5.0836,.6939;6.5719,3.0559,.027;7.5377,5.0919,1.0008;4.3688,6.2212,.5202;5.6956,6.2429,.8717;3.7393,7.1028,.6749;6.138,7.1455,1.3024;-2.3175,-3.9917,-2.877;-2.504,-5.0201,-2.53;-3.181,-3.6828,-3.4968;-1.432,-4.0003,-3.5322;-1.6799,-1.6371,-2.138;-2.4099,-1.1757,-2.8251;-1.5247,-.9614,-1.2824;-.721,-1.6891,-2.6826;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662730431603</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009409232357 0.001143425493 0.026752906330 0.005337429185</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045781425 -0.005855551 0.000152505 0.000212028 0.000307830 0.000335489 0.000367713 0.000420647 0.000500961 0.000640160 0.000692335 0.000805907 0.000844716 0.001072609 0.001197575 0.001217986 0.001258163 0.001304402 0.001423696 0.001479039 0.001500965 0.001758364 0.001912194 0.002165495 0.002223262 0.002684962 0.002928541 0.003288940 0.003544057 0.003978301 0.004311049 0.004587780 0.004917717 0.005061830 0.005096478 0.005636676 0.005816796 0.006202516 0.006778438 0.007396217 0.007777390 0.008331254 0.008462815 0.009134640 0.009336121 0.010015645 0.010250778 0.011205515 0.011900654 0.012834345 0.012934703 0.013520384 0.014349261 0.014498576 0.014868367 0.015326616 0.015646811 0.016029961 0.016385394 0.016629020 0.017451495 0.017991055 0.018984052 0.019473459 0.020413317 0.021369413 0.022286407 0.022433455 0.023054958 0.023477026 0.024597565 0.025965275 0.026321832 0.026674642 0.027208558 0.027782909 0.029830682 0.029956464 0.030426435 0.031815627 0.032538418 0.032758448 0.036802021 0.038373994 0.039529327 0.040490400 0.040999972 0.043032118 0.043714523 0.045259778 0.046158594 0.048906531 0.049669453 0.050690257 0.051375675 0.051574999 0.051813824 0.052281775 0.052388427 0.052571744 0.053832753 0.054742667 0.056493271 0.056814297 0.056893935 0.057214660 0.057707816 0.058474372 0.059112829 0.059242649 0.060427083 0.060535644 0.061346250 0.062161544 0.062385806 0.063694928 0.063982404 0.064616493 0.065399148 0.065987572 0.067923174 0.068573519 0.070726887 0.071903195 0.072664958 0.075199532 0.076503675 0.078480342 0.080666552 0.082296198 0.086158774 0.087373089 0.089486560 0.090841253 0.092848166 0.093419321 0.094331708 0.095270787 0.095622539 0.096514821 0.097280149 0.097624460 0.099479979 0.100491714 0.101260521 0.102592583 0.102798626 0.103900448 0.105032367 0.107001766 0.107784969 0.108934287 0.110307766 0.110718404 0.111283093 0.112568269 0.114276778 0.116346138 0.116551485 0.117361511 0.121702253 0.122525668 0.123247175 0.126623198 0.127758875 0.129042698 0.131622076 0.133463640 0.135507864 0.136967526 0.141308624 0.142195193 0.144538342 0.145889133 0.147455956 0.151826938 0.152565956 0.157541992 0.165409309 0.170520599 0.174355451 0.176299864 0.180556702 0.183239513 0.185680574 0.187639206 0.188682321 0.192707067 0.196938959 0.201808774 0.203009506 0.205391804 0.205773462 0.206827535 0.207159972 0.209078864 0.211207749 0.212965001 0.215709136 0.220885703 0.224840076 0.231524794 0.232695486 0.233670160 0.234437734 0.235357323 0.244566187 0.249344167 0.254637322 0.255373374 0.256711973 0.258850366 0.271378333 0.277805800 0.290062284 0.296312258 0.298312065 0.299487470 0.304299421 0.306258585 0.307545634 0.317240506 0.320596618 0.322843043 0.327270607 0.328982811 0.346025608 0.350630175 0.354704891 0.354755930 0.359257669 0.363854647 0.382011021 0.392832954 0.405614806 0.415693104 0.424469191 0.430219850 0.432193899 0.445298094 0.463963690 0.464101609 0.477884649 0.478628147 0.483620255 0.492726082 0.498032866 0.510946264 0.542539115 0.565103445 0.566775820 0.582923048 0.583820830 0.604406345 0.637211248 0.643903567 0.665397365 0.668638540 0.672353392 0.681408938 0.691751660 0.698840369 0.704241436 0.705322497 0.714520931 0.724984212 0.736826781 0.737562214 0.750680775 0.771579152 0.775844152 0.801985023 0.816794256 0.819880603 0.820660967 0.831222550 0.840297261 0.841917016 0.846267290 0.849192023 0.858142326 0.860156837 0.861908234 0.864454436 0.867348976 0.872268060 0.876098304 0.889348121 0.890430030 0.893760224 0.896782455 0.917798738 0.922226037 0.923912509 0.930758314 0.935785701 0.939214654 0.958490631 0.962628624 0.969652357 0.975955848 0.989286451 0.999625785 1.013107639 1.034065941 1.042628989 1.049332179 1.055257148 1.075765074 1.084211549 1.088667524 1.109992599 1.110587947 1.116349721 1.122412750 1.123320578 1.134258999 1.143193522 1.161234193 1.168763703 1.172673375 1.173260749 1.200411636 1.204374975 1.216232801 1.247301547 1.294309407 1.295729177 1.312941646 1.316771923 1.326284288 1.326948009 1.330138363 1.334501365 1.341012778 1.346005051 1.362281450 1.378770722 1.380827676 1.381209472 1.382963384 1.446888845 1.557481563 1.671860312 1.837671089</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">78</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8895608" y3="-0.95713141" z3="-0.70310573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55124419" y3="-1.95931516" z3="-1.60431277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03727945" y3="-1.00399841" z3="-1.46073277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74407646" y3="1.47391076" z3="-1.09451108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26582359" y3="0.31149518" z3="-0.5142582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63147" y3="2.74907159" z3="-1.12046818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98916762" y3="2.7367695" z3="-0.85432015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39007487" y3="5.00081846" z3="-0.31689221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79948505" y3="3.86651816" z3="-0.8213937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77417713" y3="5.87748057" z3="-0.09350449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04306555" y3="1.630637" z3="-1.63601224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12316626" y3="0.3673137" z3="0.23023041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68957255" y3="0.39847152" z3="-0.59413156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60740081" y3="0.74405251" z3="0.36103247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61750912" y3="-0.83857245" z3="-1.46135697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09712721" y3="-2.4721099" z3="-1.29204607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.17003434" y3="-5.50228279" z3="-6.2056981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.87492742" y3="-5.06661984" z3="-5.24684545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10468665" y3="-3.92263354" z3="-2.81244816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.83254975" y3="-3.68613806" z3="-5.10379053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55960321" y3="-5.89189608" z3="-4.1644001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18919032" y3="-5.31370471" z3="-2.95693253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.45635388" y3="-3.08202854" z3="-3.89321857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.08454621" y3="-3.01976302" z3="-5.93240502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61634256" y3="-6.97962956" z3="-4.25391407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98257698" y3="-5.94603281" z3="-2.08924056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6738361" y3="-3.37297587" z3="-1.57824053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33060951" y3="-3.86385036" z3="-0.84413136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65970243" y3="-4.87123185" z3="-1.11242767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38821461" y3="-3.55446759" z3="0.6019678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43780029" y3="-3.06925655" z3="3.3584232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69166894" y3="-4.5885658" z3="1.49632474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13138912" y3="-2.27310617" z3="1.09905757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15199398" y3="-2.03277838" z3="2.46853841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70788684" y3="-4.34792609" z3="2.86905597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87185712" y3="-5.59968706" z3="1.11962167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07527605" y3="-1.4348841" z3="0.43306164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06549443" y3="-1.02169063" z3="2.82350163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9095983" y3="-5.17132168" z3="3.55943516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44268754" y3="-2.88467655" z3="4.43664613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40592977" y3="-1.74660861" z3="-3.86966611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49606577" y3="-1.33370407" z3="-2.96519587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32488117" y3="3.73714335" z3="-0.94746803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11501274" y3="-3.02306364" z3="-1.73494192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91485397" y3="-3.17843452" z3="-0.59926746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12374359" y3="-2.28048324" z3="0.30767784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8459026" y3="-0.70814265" z3="0.52984084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.60738432" y3="-0.19829238" z3="-1.09124207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.55016538" y3="0.42591511" z3="1.2123078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18153596" y3="-1.04032996" z3="1.79869422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39538884" y3="-4.38656943" z3="-0.33981031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11853907" y3="-4.60095062" z3="0.86290232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.85563893" y3="0.16608759" z3="-1.81911782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31353706" y3="0.63260063" z3="-0.91920089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.16740795" y3="-1.03192435" z3="-1.56037222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65189043" y3="0.55808856" z3="0.58172615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20492331" y3="0.05922973" z3="2.19642457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01697843" y3="1.41731465" z3="1.36396756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6531353" y3="-0.08943227" z3="2.10528369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97831606" y3="-1.69377502" z3="1.39775318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.7620437" y3="-1.51441684" z3="2.7054619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05600957" y3="-4.0204474" z3="0.86238203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51155294" y3="-4.3262325" z3="1.74001868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34651848" y3="-5.67553614" z3="0.87908792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26409566" y3="-2.19653077" z3="-0.17205982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13439438" y3="-3.31113589" z3="-1.01350349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50322367" y3="-4.46984649" z3="-0.57747333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00233578" y3="-4.50818064" z3="0.71803688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13983068" y3="-3.43338747" z3="1.59137602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76551273" y3="-2.27888716" z3="1.13834151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49030594" y3="-3.25521099" z3="-2.04549587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3734601" y3="-5.32371622" z3="-1.24282452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27041588" y3="-5.69411139" z3="1.16461416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73216476" y3="-3.50088828" z3="2.60109026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85156834" y3="-1.42092512" z3="1.80613538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47813469" y3="4.00689029" z3="0.16861259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8525444" y3="3.81069405" z3="0.12512504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42055237" y3="3.34619008" z3="-1.05585129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65608529" y3="3.09830758" z3="-2.19373614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2815149" y3="3.28826163" z3="-2.12977057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00930952" y3="4.32923639" z3="1.10140607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48046292" y3="3.99105531" z3="0.99840575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86064361" y3="3.08186697" z3="-1.09713192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13906912" y3="2.74706655" z3="-3.1060852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.33332564" y3="3.06734931" z3="-3.00448195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17525743" y3="-5.88887579" z3="2.35539059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78177626" y3="-6.41088558" z3="0.31019024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37103271" y3="2.88398786" z3="-2.17988473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46634868" y3="3.06176132" z3="-0.04509566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56310017" y3="0.15088606" z3="-2.09512851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89478601" y3="1.40042266" z3="-1.94510621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72012145" y3="0.07171513" z3="-2.91861734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18085236" y3="1.17391683" z3="-3.59493017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23027805" y3="-0.89170242" z3="-3.01439812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.06767635" y3="1.10058488" z3="-4.23054366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37991877" y3="2.51600452" z3="-2.68359538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.49160163" y3="2.40560303" z3="-3.48389209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85255338" y3="3.46983816" z3="-2.6170055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.84301785" y3="3.27584003" z3="-4.04543445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58783033" y3="3.90085374" z3="-0.26842976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78122559" y3="5.0542505" z3="-0.04046115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95172939" y3="3.9458364" z3="0.13668395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49250886" y3="5.08579964" z3="0.68130873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57417465" y3="3.05709558" z3="0.01721998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54327191" y3="5.09452793" z3="0.98458099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37274044" y3="6.22322057" z3="0.51339601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70078339" y3="6.24550133" z3="0.86030663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7436524" y3="7.1050661" z3="0.66924915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14464768" y3="7.14870312" z3="1.28821992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31327698" y3="-3.99546343" z3="-2.87982401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50026937" y3="-5.02327147" z3="-2.53341936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17627247" y3="-3.6867782" z3="-3.49951245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42745727" y3="-4.00369399" z3="-3.5346302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67665273" y3="-1.64176338" z3="-2.13818692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40903245" y3="-1.18256548" z3="-2.82853594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5220463" y3="-0.96292704" z3="-1.28355868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7253768" y3="-1.68921978" z3="-2.68652882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8896,-.9571,-.7031;6.5512,-1.9593,-1.6043;6.0373,-1.004,-1.4607;4.7441,1.4739,-1.0945;4.2658,.3115,-.5143;2.6315,2.7491,-1.1205;3.9892,2.7368,-.8543;2.3901,5.0008,-.3169;1.7995,3.8665,-.8214;1.7742,5.8775,-.0935;2.0431,1.6306,-1.636;3.1232,.3673,.2302;1.6896,.3985,-.5941;.6074,.7441,.361;1.6175,-.8386,-1.4614;1.0971,-2.4721,-1.292;2.17,-5.5023,-6.2057;1.8749,-5.0666,-5.2468;1.1047,-3.9226,-2.8124;1.8325,-3.6861,-5.1038;1.5596,-5.8919,-4.1644;1.1892,-5.3137,-2.9569;1.4564,-3.082,-3.8932;2.0845,-3.0198,-5.9324;1.6163,-6.9796,-4.2539;.9826,-5.946,-2.0892;.6738,-3.373,-1.5782;-.3306,-3.8639,-.8441;-.6597,-4.8712,-1.1124;-.3882,-3.5545,.602;-.4378,-3.0693,3.3584;-.6917,-4.5886,1.4963;-.1314,-2.2731,1.0991;-.152,-2.0328,2.4685;-.7079,-4.3479,2.8691;-.8719,-5.5997,1.1196;.0753,-1.4349,.4331;.0655,-1.0217,2.8235;-.9096,-5.1713,3.5594;-.4427,-2.8847,4.4366;1.4059,-1.7466,-3.8697;1.4961,-1.3337,-2.9652;.3249,3.7371,-.9475;-2.115,-3.0231,-1.7349;-2.9149,-3.1784,-.5993;-3.1237,-2.2805,.3077;-3.8459,-.7081,.5298;-4.6074,-.1983,-1.0912;-2.5502,.4259,1.2123;-5.1815,-1.0403,1.7987;-3.3954,-4.3866,-.3398;-4.1185,-4.601,.8629;-3.8556,.1661,-1.8191;-5.3135,.6326,-.9192;-5.1674,-1.0319,-1.5604;-1.6519,.5581,.5817;-2.2049,.0592,2.1964;-3.017,1.4173,1.364;-5.6531,-.0894,2.1053;-5.9783,-1.6938,1.3978;-4.762,-1.5144,2.7055;-5.056,-4.0204,.8624;-3.5116,-4.3262,1.74;-4.3465,-5.6755,.8791;4.2641,-2.1965,-.1721;4.1344,-3.3111,-1.0135;3.5032,-4.4698,-.5775;3.0023,-4.5082,.718;3.1398,-3.4334,1.5914;3.7655,-2.2789,1.1383;4.4903,-3.2552,-2.0455;3.3735,-5.3237,-1.2428;2.2704,-5.6941,1.1646;2.7322,-3.5009,2.6011;3.8516,-1.4209,1.8061;-.4781,4.0069,.1686;-1.8525,3.8107,.1251;-2.4206,3.3462,-1.0559;-1.6561,3.0983,-2.1937;-.2815,3.2883,-2.1298;-.0093,4.3292,1.1014;-2.4805,3.9911,.9984;-3.8606,3.0819,-1.0971;-2.1391,2.7471,-3.1061;.3333,3.0673,-3.0045;2.1753,-5.8889,2.3554;1.7818,-6.4109,.3102;-4.371,2.884,-2.1799;-4.4663,3.0618,-.0451;6.5631,.1509,-2.0951;5.8948,1.4004,-1.9451;7.7201,.0717,-2.9186;8.1809,1.1739,-3.5949;8.2303,-.8917,-3.0144;9.0677,1.1006,-4.2305;6.3799,2.516,-2.6836;7.4916,2.4056,-3.4839;5.8526,3.4698,-2.617;7.843,3.2758,-4.0454;4.5878,3.9009,-.2684;3.7812,5.0543,-.0405;5.9517,3.9458,.1367;6.4925,5.0858,.6813;6.5742,3.0571,.0172;7.5433,5.0945,.9846;4.3727,6.2232,.5134;5.7008,6.2455,.8603;3.7437,7.1051,.6692;6.1446,7.1487,1.2882;-2.3133,-3.9955,-2.8798;-2.5003,-5.0233,-2.5334;-3.1763,-3.6868,-3.4995;-1.4275,-4.0037,-3.5346;-1.6767,-1.6418,-2.1382;-2.409,-1.1826,-2.8285;-1.522,-.9629,-1.2836;-.7254,-1.6892,-2.6865;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662738946243</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.009099561862 0.001086127843 0.022702932109 0.005338211465</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.045983654 -0.005039787 0.000151800 0.000215074 0.000321880 0.000335356 0.000367719 0.000420621 0.000502780 0.000641354 0.000694005 0.000806489 0.000870576 0.001072702 0.001200007 0.001227457 0.001259182 0.001304392 0.001453986 0.001491716 0.001501525 0.001760563 0.001915049 0.002178797 0.002298621 0.002690869 0.002945855 0.003294215 0.003575786 0.003984190 0.004326556 0.004638325 0.004912964 0.005064214 0.005269882 0.005658824 0.005830980 0.006207055 0.006778058 0.007396649 0.007780830 0.008332814 0.008467453 0.009126813 0.009331755 0.010014629 0.010254320 0.011206963 0.011961830 0.012839759 0.012935919 0.013537419 0.014349422 0.014497651 0.014867255 0.015325770 0.015652250 0.016033451 0.016387696 0.016671667 0.017460028 0.018003358 0.018989266 0.019490823 0.020413001 0.021388016 0.022282867 0.022433417 0.023053662 0.023475392 0.024597288 0.025964854 0.026323766 0.026675299 0.027217912 0.027782864 0.029831983 0.030080754 0.030426400 0.031825753 0.032541040 0.032758416 0.036807881 0.038374113 0.039529358 0.040513828 0.041000156 0.043063297 0.043738802 0.045260100 0.046158519 0.049184868 0.049669469 0.050691185 0.051375541 0.051575037 0.051813827 0.052281774 0.052388452 0.052571865 0.053833420 0.054742730 0.056493270 0.056822766 0.056910496 0.057216623 0.057728378 0.058546722 0.059219616 0.060176698 0.060483719 0.060642641 0.061360296 0.062134053 0.062385271 0.063735460 0.064108279 0.064621451 0.065427199 0.066038758 0.067938776 0.068584506 0.070933717 0.071903062 0.072666359 0.075526642 0.076504692 0.078479987 0.080667370 0.082296439 0.086233023 0.087374629 0.089486422 0.090841067 0.092849155 0.093419979 0.094331461 0.095270801 0.095634770 0.096515776 0.097296841 0.097625366 0.099478159 0.100792968 0.101273159 0.102593472 0.102798136 0.103929031 0.105796697 0.107037722 0.107785616 0.108935089 0.110309569 0.110743948 0.111460766 0.112568801 0.114422442 0.116357681 0.116551086 0.117361614 0.121875759 0.122957100 0.123893925 0.126659168 0.127775896 0.129053026 0.131746293 0.133461800 0.135563154 0.136968108 0.141590268 0.142227352 0.144538294 0.145885129 0.147435921 0.151843073 0.152563855 0.157533712 0.165409716 0.170524984 0.174363771 0.176307663 0.180557917 0.183239329 0.185682027 0.187650130 0.188690024 0.192689263 0.197067048 0.201829653 0.203942395 0.205408201 0.206231692 0.206833697 0.207160052 0.209079484 0.211312497 0.213023489 0.215741164 0.220885923 0.224841423 0.231526995 0.232721182 0.233676828 0.234734186 0.235661667 0.244567837 0.249368384 0.254652154 0.255385693 0.256712085 0.258861651 0.271378362 0.277875824 0.290065436 0.296332094 0.298370837 0.299492592 0.304303525 0.306280408 0.307545793 0.317390711 0.320598401 0.322854586 0.327381775 0.328999943 0.346025429 0.350629983 0.354750413 0.354763204 0.359267885 0.363855224 0.382011746 0.393125183 0.405614253 0.415725210 0.426423251 0.430276545 0.432681804 0.445297826 0.463991632 0.464118059 0.477885021 0.478772460 0.483623582 0.492911991 0.498033053 0.511023968 0.542550068 0.565114597 0.566776155 0.582996907 0.583917205 0.604411699 0.637550676 0.643911673 0.665412092 0.669493441 0.672360730 0.681410279 0.691751646 0.698840481 0.704241448 0.705340166 0.714539935 0.725381336 0.736902794 0.737613050 0.750680845 0.771579203 0.775844149 0.802144856 0.816801577 0.819889149 0.820671069 0.831223707 0.840368959 0.842505666 0.846277786 0.849246469 0.858192679 0.861628755 0.863940565 0.864667598 0.867354117 0.872269222 0.876183600 0.889424649 0.890515832 0.893782841 0.902365395 0.917807855 0.923903449 0.925434818 0.930800652 0.935802691 0.939210617 0.958499041 0.962720278 0.969655581 0.975959086 0.989293714 0.999625940 1.013107693 1.034068055 1.042630734 1.049332891 1.055257604 1.075772145 1.084211683 1.088667549 1.109992887 1.110588510 1.116353490 1.122412747 1.123320592 1.134259521 1.143193934 1.161234849 1.168764549 1.172673554 1.173262098 1.200412182 1.204392158 1.216245199 1.247302220 1.294401426 1.295729410 1.313005788 1.316868916 1.326284744 1.326950373 1.330138378 1.334502913 1.341018101 1.346005459 1.362284050 1.378771054 1.380839613 1.381225225 1.383134694 1.447489459 1.557484544 1.671860493 1.841224142</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">79</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88864931" y3="-0.95683102" z3="-0.70196042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54957768" y3="-1.95984603" z3="-1.60368799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03546559" y3="-1.00448719" z3="-1.46090503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74213779" y3="1.47385329" z3="-1.09626587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26511047" y3="0.31202493" z3="-0.51372218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62951042" y3="2.74992754" z3="-1.1172039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98809795" y3="2.73731245" z3="-0.85523179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39137726" y3="5.0025331" z3="-0.31504907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.798885" y3="3.8680365" z3="-0.81684268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77647742" y3="5.87966391" z3="-0.09051865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03944935" y3="1.63141742" z3="-1.63067653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1239883" y3="0.36846251" z3="0.23301022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68865515" y3="0.39886794" z3="-0.58833253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60825379" y3="0.74310448" z3="0.36919178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61535647" y3="-0.8380351" z3="-1.45604928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09835654" y3="-2.47253497" z3="-1.28838047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.17916144" y3="-5.49779802" z3="-6.20324955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.88252433" y3="-5.06317008" z3="-5.24441487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10865554" y3="-3.9218896" z3="-2.81004741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.83963841" y3="-3.68289272" z3="-5.10004055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56571684" y3="-5.88964239" z3="-4.16330508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19355057" y3="-5.31277881" z3="-2.95582371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.46149857" y3="-3.08003094" z3="-3.88942077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09279278" y3="-3.0156654" z3="-5.92760505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62265428" y3="-6.9772506" z3="-4.25385331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98581391" y3="-5.94604426" z3="-2.08910675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6762819" y3="-3.37385373" z3="-1.57551991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32670913" y3="-3.86684388" z3="-0.84236084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65675385" y3="-4.87292246" z3="-1.11280982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38859943" y3="-3.5572197" z3="0.6028877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44358376" y3="-3.07279893" z3="3.35907977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69445956" y3="-4.59150196" z3="1.49608365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13279875" y3="-2.27583217" z3="1.10070665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15613279" y3="-2.03586626" z3="2.4701416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71328556" y3="-4.35119164" z3="2.86872413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87488144" y3="-5.60204812" z3="1.11841301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07444385" y3="-1.43709737" z3="0.43497625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06014392" y3="-1.02455801" z3="2.82572702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91709185" y3="-5.17458151" z3="3.55807773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45061037" y3="-2.88821396" z3="4.43729498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41065717" y3="-1.74469221" z3="-3.86480469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49876019" y3="-1.33232205" z3="-2.95995015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32398981" y3="3.73972162" z3="-0.93974293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11656224" y3="-3.02399736" z3="-1.73783388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91475665" y3="-3.17882206" z3="-0.60094811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12418792" y3="-2.28239614" z3="0.30682506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84860381" y3="-0.70856136" z3="0.52809866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.59408647" y3="-0.19067811" z3="-1.10759039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54965246" y3="0.41852149" z3="1.21950078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19120055" y3="-1.04025762" z3="1.78763852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39553976" y3="-4.38682865" z3="-0.34262567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12041009" y3="-4.60253567" z3="0.85835169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.85242045" y3="0.17267548" z3="-1.82856683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31539045" y3="0.63033006" z3="-0.92990146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.14562593" y3="-1.02453482" z3="-1.57502255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64861472" y3="0.55168869" z3="0.59281842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20915854" y3="0.04552509" z3="2.20015639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0089772" y3="1.41406974" z3="1.36833211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66623312" y3="-0.08519043" z3="2.08672518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98379513" y3="-1.69334935" z3="1.38612524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.77578056" y3="-1.51161537" z3="2.69561252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05666468" y3="-4.02114433" z3="0.85769364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5156356" y3="-4.33144025" z3="1.73660627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35046204" y3="-5.67560014" z3="0.87229932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26364732" y3="-2.1958635" z3="-0.16945014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13459411" y3="-3.31129393" z3="-1.00990294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50349545" y3="-4.46975705" z3="-0.57314916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00180061" y3="-4.50705975" z3="0.72205244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13876049" y3="-3.43149898" z3="1.59453274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76457128" y3="-2.27729038" z3="1.14084396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49085917" y3="-3.25622189" z3="-2.04180563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3742375" y3="-5.32418891" z3="-1.23781299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26946099" y3="-5.69259363" z3="1.16895204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73049479" y3="-3.49813231" z3="2.60406396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85018216" y3="-1.41880736" z3="1.80801239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47751842" y3="4.01016802" z3="0.17580092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85158863" y3="3.81337225" z3="0.135307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42156277" y3="3.34951789" z3="-1.04339194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65845552" y3="3.10072977" z3="-2.18038729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28421845" y3="3.29077198" z3="-2.1192276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00782251" y3="4.33402512" z3="1.10593002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4792538" y3="3.99554051" z3="1.00657112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86275727" y3="3.08845819" z3="-1.08384913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14321564" y3="2.75042025" z3="-3.09131825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32946001" y3="3.07083781" z3="-2.99383479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17347228" y3="-5.88664646" z3="2.3597937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78126314" y3="-6.40972639" z3="0.31455517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37565205" y3="2.89800441" z3="-2.16506079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46311477" y3="3.05387763" z3="-0.02239273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55996191" y3="0.14955859" z3="-2.09785055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89134736" y3="1.39911993" z3="-1.94897641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71582862" y3="0.06929583" z3="-2.92286346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.17506039" y3="1.17038693" z3="-3.60197013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22626851" y3="-0.89409319" z3="-3.01753528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.06095767" y3="1.09621535" z3="-4.23876815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37489485" y3="2.51343503" z3="-2.69041812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.4853662" y3="2.40194964" z3="-3.49226453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84726347" y3="3.46718669" z3="-2.62482336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.83550719" y3="3.27124474" z3="-4.05605044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58896459" y3="3.90193787" z3="-0.27251425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78338368" y3="5.05581284" z3="-0.04319017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95425331" y3="3.94719976" z3="0.12797899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49707652" y3="5.08779765" z3="0.66928885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57620542" y3="3.05821152" z3="0.00760377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54888123" y3="5.09667845" z3="0.96897291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3769617" y3="6.22537979" z3="0.50711872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70620636" y3="6.24790643" z3="0.84943692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74849468" y3="7.10748528" z3="0.66385514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15166921" y3="7.15159703" z3="1.27465724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31061418" y3="-3.99985619" z3="-2.88190292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49745253" y3="-5.02769316" z3="-2.53520458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17222045" y3="-3.69209642" z3="-3.50435735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42344848" y3="-4.00823136" z3="-3.5351182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67671403" y3="-1.64346134" z3="-2.14432652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40562226" y3="-1.18283578" z3="-2.8334595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52328994" y3="-0.9672851" z3="-1.28888862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71663434" y3="-1.69516709" z3="-2.68702893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8886,-.9568,-.702;6.5496,-1.9598,-1.6037;6.0355,-1.0045,-1.4609;4.7421,1.4739,-1.0963;4.2651,.312,-.5137;2.6295,2.7499,-1.1172;3.9881,2.7373,-.8552;2.3914,5.0025,-.315;1.7989,3.868,-.8168;1.7765,5.8797,-.0905;2.0394,1.6314,-1.6307;3.124,.3685,.233;1.6887,.3989,-.5883;.6083,.7431,.3692;1.6154,-.838,-1.456;1.0984,-2.4725,-1.2884;2.1792,-5.4978,-6.2032;1.8825,-5.0632,-5.2444;1.1087,-3.9219,-2.81;1.8396,-3.6829,-5.1;1.5657,-5.8896,-4.1633;1.1936,-5.3128,-2.9558;1.4615,-3.08,-3.8894;2.0928,-3.0157,-5.9276;1.6227,-6.9773,-4.2539;.9858,-5.946,-2.0891;.6763,-3.3739,-1.5755;-.3267,-3.8668,-.8424;-.6568,-4.8729,-1.1128;-.3886,-3.5572,.6029;-.4436,-3.0728,3.3591;-.6945,-4.5915,1.4961;-.1328,-2.2758,1.1007;-.1561,-2.0359,2.4701;-.7133,-4.3512,2.8687;-.8749,-5.602,1.1184;.0744,-1.4371,.435;.0601,-1.0246,2.8257;-.9171,-5.1746,3.5581;-.4506,-2.8882,4.4373;1.4107,-1.7447,-3.8648;1.4988,-1.3323,-2.96;.324,3.7397,-.9397;-2.1166,-3.024,-1.7378;-2.9148,-3.1788,-.6009;-3.1242,-2.2824,.3068;-3.8486,-.7086,.5281;-4.5941,-.1907,-1.1076;-2.5497,.4185,1.2195;-5.1912,-1.0403,1.7876;-3.3955,-4.3868,-.3426;-4.1204,-4.6025,.8584;-3.8524,.1727,-1.8286;-5.3154,.6303,-.9299;-5.1456,-1.0245,-1.575;-1.6486,.5517,.5928;-2.2092,.0455,2.2002;-3.009,1.4141,1.3683;-5.6662,-.0852,2.0867;-5.9838,-1.6933,1.3861;-4.7758,-1.5116,2.6956;-5.0567,-4.0211,.8577;-3.5156,-4.3314,1.7366;-4.3505,-5.6756,.8723;4.2636,-2.1959,-.1695;4.1346,-3.3113,-1.0099;3.5035,-4.4698,-.5731;3.0018,-4.5071,.7221;3.1388,-3.4315,1.5945;3.7646,-2.2773,1.1408;4.4909,-3.2562,-2.0418;3.3742,-5.3242,-1.2378;2.2695,-5.6926,1.169;2.7305,-3.4981,2.6041;3.8502,-1.4188,1.808;-.4775,4.0102,.1758;-1.8516,3.8134,.1353;-2.4216,3.3495,-1.0434;-1.6585,3.1007,-2.1804;-.2842,3.2908,-2.1192;-.0078,4.334,1.1059;-2.4793,3.9955,1.0066;-3.8628,3.0885,-1.0838;-2.1432,2.7504,-3.0913;.3295,3.0708,-2.9938;2.1735,-5.8866,2.3598;1.7813,-6.4097,.3146;-4.3757,2.898,-2.1651;-4.4631,3.0539,-.0224;6.56,.1496,-2.0979;5.8913,1.3991,-1.949;7.7158,.0693,-2.9229;8.1751,1.1704,-3.602;8.2263,-.8941,-3.0175;9.061,1.0962,-4.2388;6.3749,2.5134,-2.6904;7.4854,2.4019,-3.4923;5.8473,3.4672,-2.6248;7.8355,3.2712,-4.0561;4.589,3.9019,-.2725;3.7834,5.0558,-.0432;5.9543,3.9472,.128;6.4971,5.0878,.6693;6.5762,3.0582,.0076;7.5489,5.0967,.969;4.377,6.2254,.5071;5.7062,6.2479,.8494;3.7485,7.1075,.6639;6.1517,7.1516,1.2747;-2.3106,-3.9999,-2.8819;-2.4975,-5.0277,-2.5352;-3.1722,-3.6921,-3.5044;-1.4234,-4.0082,-3.5351;-1.6767,-1.6435,-2.1443;-2.4056,-1.1828,-2.8335;-1.5233,-.9673,-1.2889;-.7166,-1.6952,-2.687;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662727060386</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007640751524 0.001036515161 0.023359103494 0.005338067525</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046238066 -0.004984827 0.000151928 0.000216638 0.000324464 0.000339388 0.000370315 0.000421318 0.000505611 0.000641666 0.000697369 0.000806461 0.000907890 0.001072773 0.001209130 0.001230494 0.001264165 0.001306589 0.001461082 0.001499421 0.001653743 0.001771357 0.001915866 0.002188494 0.002522106 0.002803919 0.002990975 0.003294489 0.003597221 0.004023320 0.004337168 0.004644531 0.004940235 0.005107004 0.005501056 0.005787049 0.005839515 0.006263521 0.006780850 0.007398025 0.007780937 0.008332084 0.008463386 0.009131956 0.009336854 0.010042365 0.010264165 0.011249711 0.011962539 0.012839308 0.012942208 0.013536560 0.014349281 0.014498998 0.014873691 0.015340937 0.015652411 0.016040252 0.016390767 0.016670599 0.017466096 0.018017542 0.018990675 0.019562540 0.020414819 0.021465533 0.022343085 0.022440262 0.023062767 0.023483814 0.024599687 0.025968205 0.026349391 0.026678014 0.027264180 0.027782849 0.029832962 0.030097143 0.030426450 0.031824767 0.032541750 0.032758905 0.036806935 0.038373976 0.039529001 0.040524902 0.041001618 0.043067887 0.043763369 0.045264561 0.046158611 0.049382726 0.049669480 0.050709511 0.051376010 0.051575059 0.051813833 0.052281778 0.052388456 0.052572179 0.053833381 0.054742759 0.056493267 0.056828206 0.056925929 0.057221696 0.057733728 0.058559142 0.059220492 0.060317610 0.060529770 0.060922897 0.061363385 0.062338271 0.062412517 0.063807649 0.064222625 0.064628477 0.065534754 0.066073278 0.067949350 0.068606732 0.071154386 0.071904395 0.072667083 0.076002437 0.076504722 0.078484523 0.080669718 0.082297916 0.086271597 0.087385919 0.089487268 0.090841256 0.092849382 0.093440965 0.094331455 0.095273367 0.095634077 0.096545042 0.097330434 0.097638342 0.099499714 0.100913162 0.101284526 0.102595206 0.102803917 0.103940990 0.106610394 0.107258099 0.107806893 0.109010976 0.110359915 0.110758660 0.111588982 0.112578161 0.114544048 0.116357017 0.116554057 0.117362124 0.121876766 0.123043515 0.125042853 0.126699495 0.127795766 0.129053646 0.131746414 0.133480574 0.135651961 0.136988007 0.142146856 0.142771161 0.144538428 0.145938105 0.147899318 0.151849981 0.152589800 0.157712987 0.165409621 0.170535848 0.174398560 0.176312538 0.180572581 0.183240767 0.185686624 0.187651229 0.188690898 0.192734134 0.197110012 0.201837449 0.204290123 0.205411846 0.206564931 0.206869275 0.207160607 0.209079630 0.211310696 0.213064050 0.215855788 0.220885688 0.224844726 0.231528881 0.232725181 0.233678524 0.234732369 0.235702732 0.244580507 0.249374683 0.254651207 0.255387561 0.256720059 0.258861120 0.271378380 0.277881772 0.290070230 0.296336896 0.298418320 0.299493047 0.304303697 0.306282234 0.307546045 0.317526331 0.320598309 0.322854133 0.327494109 0.329002299 0.346038896 0.350632256 0.354749233 0.354765682 0.359273892 0.363856972 0.382031682 0.393451309 0.405629407 0.415759844 0.427639890 0.430318624 0.433301268 0.445308475 0.464022929 0.464117301 0.477885337 0.478787866 0.483644270 0.493010902 0.498033096 0.511082871 0.542561790 0.565139798 0.566778631 0.583105164 0.584203232 0.604427245 0.637542590 0.643937424 0.665412921 0.669471019 0.672430209 0.681410645 0.691755835 0.698841261 0.704241483 0.705343468 0.714599948 0.725820934 0.736922846 0.737657766 0.750680847 0.771579272 0.775844584 0.802221965 0.816807264 0.819889374 0.820685096 0.831235696 0.840394570 0.842815145 0.846290404 0.849264727 0.858205199 0.862222335 0.864338835 0.867239760 0.867483507 0.872276575 0.876189247 0.889440791 0.890598032 0.893782677 0.905820134 0.917808125 0.923907011 0.928941432 0.930901738 0.935802653 0.939407249 0.958501699 0.962771797 0.969656587 0.975980521 0.989320658 0.999627177 1.013108489 1.034073885 1.042633479 1.049334897 1.055257631 1.075775028 1.084212011 1.088667566 1.109993058 1.110588778 1.116356032 1.122412894 1.123320691 1.134259549 1.143193984 1.161234866 1.168773747 1.172688467 1.173270153 1.200414398 1.204446361 1.216267381 1.247302382 1.294448973 1.295729413 1.313004876 1.316874093 1.326285123 1.326953966 1.330138532 1.334504617 1.341018522 1.346008291 1.362287464 1.378771901 1.380847023 1.381237888 1.383273286 1.450261853 1.557488078 1.671860661 1.843540095</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">80</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88833771" y3="-0.95623393" z3="-0.70012153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54860945" y3="-1.95992725" z3="-1.60235955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03432868" y3="-1.00455154" z3="-1.46028221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74091425" y3="1.47389906" z3="-1.09747257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26493929" y3="0.31281543" z3="-0.51258812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62852742" y3="2.74996551" z3="-1.11604776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98747156" y3="2.7375706" z3="-0.85671953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3924646" y3="5.00371378" z3="-0.31675115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79913628" y3="3.86855048" z3="-0.81601271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77818375" y3="5.88111935" z3="-0.09199675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03619571" y3="1.63137763" z3="-1.6266079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12510454" y3="0.37036879" z3="0.23601229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68831699" y3="0.39936405" z3="-0.5827039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60949726" y3="0.74332472" z3="0.37674481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.614227" y3="-0.83787771" z3="-1.44952275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09859825" y3="-2.47325407" z3="-1.28479081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.18858277" y3="-5.49402427" z3="-6.20052545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8904123" y3="-5.06039614" z3="-5.24171081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11226218" y3="-3.92143205" z3="-2.80735827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.84725064" y3="-3.68025251" z3="-5.09600979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57187548" y3="-5.88790995" z3="-4.16189792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19768327" y3="-5.31220858" z3="-2.95441076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.46702312" y3="-3.07863889" z3="-3.8854469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.10166578" y3="-3.01210426" z3="-5.92244845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62896837" y3="-6.97544482" z3="-4.25348352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98852214" y3="-5.94636143" z3="-2.08865758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67747168" y3="-3.37424934" z3="-1.5733806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3285675" y3="-3.86693307" z3="-0.84282978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65533464" y3="-4.87451863" z3="-1.11312575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39154459" y3="-3.559007" z3="0.60314962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45145441" y3="-3.07677757" z3="3.35980079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69967034" y3="-4.59374263" z3="1.49516085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13501695" y3="-2.2787238" z3="1.10267732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16074299" y3="-2.03993167" z3="2.47230354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72111921" y3="-4.35447238" z3="2.86793599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87893573" y3="-5.60462961" z3="1.1167773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07660635" y3="-1.44081066" z3="0.43878123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05669801" y3="-1.0300018" z3="2.82941279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9262431" y3="-5.17844611" z3="3.55666019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46044172" y3="-2.89311674" z3="4.43809814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41617212" y3="-1.74332513" z3="-3.85977494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50142839" y3="-1.33161854" z3="-2.95427617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32390489" y3="3.73989771" z3="-0.93552385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11198528" y3="-3.0279774" z3="-1.73912578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91584175" y3="-3.18060795" z3="-0.60580946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12775683" y3="-2.28308521" z3="0.30024594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8465071" y3="-0.70832331" z3="0.52068275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.58913912" y3="-0.18861617" z3="-1.10824147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54952529" y3="0.41480476" z3="1.22077082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1979282" y3="-1.0399477" z3="1.77467091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39890544" y3="-4.38699498" z3="-0.34868474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12428724" y3="-4.60312621" z3="0.85273886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.83531036" y3="0.18844856" z3="-1.82257259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30594072" y3="0.63259496" z3="-0.93355123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.13619748" y3="-1.02085245" z3="-1.58785797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64373411" y3="0.54604086" z3="0.59879903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21512675" y3="0.03951839" z3="2.20515348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01003352" y3="1.40583675" z3="1.37562414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66594143" y3="-0.09017598" z3="2.07976464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99203194" y3="-1.6912181" z3="1.36503517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.78815678" y3="-1.51868291" z3="2.68067998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06090174" y3="-4.02191329" z3="0.85218648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51777152" y3="-4.33038993" z3="1.73102607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.353824" y3="-5.67732547" z3="0.86748306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26382457" y3="-2.194932" z3="-0.1662713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13515258" y3="-3.31109754" z3="-1.00584487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50384789" y3="-4.46918374" z3="-0.5684429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00141911" y3="-4.50536607" z3="0.72648769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13822414" y3="-3.42918753" z3="1.59824056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76442976" y3="-2.27540835" z3="1.14397566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49162586" y3="-3.25686795" z3="-2.03772527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37476328" y3="-5.32409812" z3="-1.23252608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26815091" y3="-5.69022875" z3="1.17362155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.72946765" y3="-3.49496918" z3="2.60763071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.84993929" y3="-1.41651246" z3="1.81059602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47295314" y3="4.0055067" z3="0.18762623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84773417" y3="3.81030013" z3="0.15078749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42374296" y3="3.35442229" z3="-1.03270263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66504593" y3="3.10966215" z3="-2.17589171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.289507" y3="3.29665827" z3="-2.11726015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00313871" y3="4.32211157" z3="1.12121809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4710181" y3="3.9874917" z3="1.02993022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86484445" y3="3.09387264" z3="-1.06923181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15468356" y3="2.76470428" z3="-3.08899644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32121689" y3="3.07788961" z3="-2.9954566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17073895" y3="-5.88312946" z3="2.36449566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78066247" y3="-6.40798259" z3="0.31933846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38115386" y3="2.90814857" z3="-2.14967599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4643217" y3="3.06318108" z3="-0.01379228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55758287" y3="0.14866092" z3="-2.09969244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88862102" y3="1.39816206" z3="-1.95208981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71236625" y3="0.0674297" z3="-2.92610428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.17002165" y3="1.16743661" z3="-3.60800672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22319014" y3="-0.89587054" z3="-3.01956014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.05510301" y3="1.09252195" z3="-4.24583457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37035875" y3="2.51124833" z3="-2.69656868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47968698" y3="2.39877251" z3="-3.49986221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84224606" y3="3.46481083" z3="-2.63215978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.82845492" y3="3.26709137" z3="-4.06600068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5897046" y3="3.90306292" z3="-0.27718348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78492043" y3="5.05733587" z3="-0.04785801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95586703" y3="3.94896898" z3="0.11992494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50023186" y3="5.09042357" z3="0.65773406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57740291" y3="3.05983099" z3="-0.00035361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55277082" y3="5.09976894" z3="0.95458198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37998656" y3="6.22775344" z3="0.49907223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71002837" y3="6.25084219" z3="0.83787069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.75215455" y3="7.11023104" z3="0.65593333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15674175" y3="7.15522727" z3="1.26023533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30669629" y3="-4.00280332" z3="-2.88322205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49363942" y3="-5.03066285" z3="-2.53559755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1681995" y3="-3.69590737" z3="-3.5062529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41908969" y3="-4.01166104" z3="-3.53564417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67190871" y3="-1.64772226" z3="-2.14486819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40201181" y3="-1.18814521" z3="-2.83685484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51805555" y3="-0.9683918" z3="-1.29081292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71823595" y3="-1.69778601" z3="-2.69069032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8883,-.9562,-.7001;6.5486,-1.9599,-1.6024;6.0343,-1.0046,-1.4603;4.7409,1.4739,-1.0975;4.2649,.3128,-.5126;2.6285,2.75,-1.116;3.9875,2.7376,-.8567;2.3925,5.0037,-.3168;1.7991,3.8686,-.816;1.7782,5.8811,-.092;2.0362,1.6314,-1.6266;3.1251,.3704,.236;1.6883,.3994,-.5827;.6095,.7433,.3767;1.6142,-.8379,-1.4495;1.0986,-2.4733,-1.2848;2.1886,-5.494,-6.2005;1.8904,-5.0604,-5.2417;1.1123,-3.9214,-2.8074;1.8473,-3.6803,-5.096;1.5719,-5.8879,-4.1619;1.1977,-5.3122,-2.9544;1.467,-3.0786,-3.8854;2.1017,-3.0121,-5.9224;1.629,-6.9754,-4.2535;.9885,-5.9464,-2.0887;.6775,-3.3742,-1.5734;-.3286,-3.8669,-.8428;-.6553,-4.8745,-1.1131;-.3915,-3.559,.6031;-.4515,-3.0768,3.3598;-.6997,-4.5937,1.4952;-.135,-2.2787,1.1027;-.1607,-2.0399,2.4723;-.7211,-4.3545,2.8679;-.8789,-5.6046,1.1168;.0766,-1.4408,.4388;.0567,-1.03,2.8294;-.9262,-5.1784,3.5567;-.4604,-2.8931,4.4381;1.4162,-1.7433,-3.8598;1.5014,-1.3316,-2.9543;.3239,3.7399,-.9355;-2.112,-3.028,-1.7391;-2.9158,-3.1806,-.6058;-3.1278,-2.2831,.3002;-3.8465,-.7083,.5207;-4.5891,-.1886,-1.1082;-2.5495,.4148,1.2208;-5.1979,-1.0399,1.7747;-3.3989,-4.387,-.3487;-4.1243,-4.6031,.8527;-3.8353,.1884,-1.8226;-5.3059,.6326,-.9336;-5.1362,-1.0209,-1.5879;-1.6437,.546,.5988;-2.2151,.0395,2.2052;-3.01,1.4058,1.3756;-5.6659,-.0902,2.0798;-5.992,-1.6912,1.365;-4.7882,-1.5187,2.6807;-5.0609,-4.0219,.8522;-3.5178,-4.3304,1.731;-4.3538,-5.6773,.8675;4.2638,-2.1949,-.1663;4.1352,-3.3111,-1.0058;3.5038,-4.4692,-.5684;3.0014,-4.5054,.7265;3.1382,-3.4292,1.5982;3.7644,-2.2754,1.144;4.4916,-3.2569,-2.0377;3.3748,-5.3241,-1.2325;2.2682,-5.6902,1.1736;2.7295,-3.495,2.6076;3.8499,-1.4165,1.8106;-.473,4.0055,.1876;-1.8477,3.8103,.1508;-2.4237,3.3544,-1.0327;-1.665,3.1097,-2.1759;-.2895,3.2967,-2.1173;.0031,4.3221,1.1212;-2.471,3.9875,1.0299;-3.8648,3.0939,-1.0692;-2.1547,2.7647,-3.089;.3212,3.0779,-2.9955;2.1707,-5.8831,2.3645;1.7807,-6.408,.3193;-4.3812,2.9081,-2.1497;-4.4643,3.0632,-.0138;6.5576,.1487,-2.0997;5.8886,1.3982,-1.9521;7.7124,.0674,-2.9261;8.17,1.1674,-3.608;8.2232,-.8959,-3.0196;9.0551,1.0925,-4.2458;6.3704,2.5112,-2.6966;7.4797,2.3988,-3.4999;5.8422,3.4648,-2.6322;7.8285,3.2671,-4.066;4.5897,3.9031,-.2772;3.7849,5.0573,-.0479;5.9559,3.949,.1199;6.5002,5.0904,.6577;6.5774,3.0598,-.0004;7.5528,5.0998,.9546;4.38,6.2278,.4991;5.71,6.2508,.8379;3.7522,7.1102,.6559;6.1567,7.1552,1.2602;-2.3067,-4.0028,-2.8832;-2.4936,-5.0307,-2.5356;-3.1682,-3.6959,-3.5063;-1.4191,-4.0117,-3.5356;-1.6719,-1.6477,-2.1449;-2.402,-1.1881,-2.8369;-1.5181,-.9684,-1.2908;-.7182,-1.6978,-2.6907;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662734710484</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007761208094 0.000887860163 0.022974415776 0.005336780240</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046408805 -0.003464170 0.000152253 0.000220687 0.000328621 0.000338770 0.000371731 0.000421326 0.000505399 0.000642207 0.000703860 0.000807631 0.000929809 0.001072759 0.001218982 0.001232329 0.001263626 0.001308083 0.001461231 0.001499526 0.001706062 0.001787550 0.001919329 0.002192476 0.002549003 0.002860239 0.003060755 0.003298916 0.003615860 0.004068987 0.004337789 0.004653455 0.004937255 0.005115134 0.005489158 0.005798556 0.005850621 0.006298987 0.006787042 0.007398099 0.007781080 0.008347264 0.008479386 0.009139026 0.009346684 0.010092763 0.010266413 0.011374518 0.011970076 0.012849287 0.012950231 0.013546510 0.014352735 0.014498946 0.014879540 0.015370322 0.015654696 0.016052529 0.016394709 0.016678724 0.017468258 0.018021869 0.018990770 0.019569782 0.020417612 0.021479391 0.022378398 0.022463943 0.023081500 0.023502114 0.024607835 0.025974144 0.026369624 0.026680094 0.027329098 0.027783342 0.029840541 0.030254099 0.030426647 0.031826014 0.032545839 0.032759861 0.036806718 0.038373896 0.039528825 0.040531100 0.041003452 0.043135335 0.043788118 0.045273112 0.046159412 0.049594114 0.049669523 0.050721700 0.051376493 0.051575130 0.051814164 0.052281777 0.052388456 0.052573237 0.053833359 0.054742857 0.056493377 0.056831778 0.056942367 0.057229196 0.057734969 0.058564704 0.059220613 0.060324021 0.060563594 0.060909354 0.061430344 0.062371845 0.062609223 0.063963775 0.064249689 0.064627211 0.065766579 0.066085332 0.067950862 0.068632459 0.071245489 0.071910944 0.072667197 0.076502619 0.076605953 0.078493556 0.080670094 0.082298736 0.086273290 0.087397981 0.089489999 0.090841052 0.092849519 0.093474604 0.094332562 0.095276244 0.095635694 0.096583314 0.097355066 0.097672952 0.099554953 0.100908939 0.101283612 0.102599561 0.102803034 0.103943216 0.106742950 0.107428441 0.108138173 0.109269516 0.110493436 0.110759086 0.111654535 0.112597881 0.114607175 0.116359408 0.116563934 0.117365300 0.121877089 0.123058811 0.125565848 0.126739502 0.127810191 0.129053718 0.131758347 0.133503797 0.135684067 0.137004932 0.142178756 0.143322833 0.144538313 0.146019418 0.149141378 0.151919463 0.152669476 0.158275522 0.165410121 0.170539801 0.174423947 0.176311980 0.180589502 0.183249611 0.185734770 0.187651230 0.188691189 0.192785334 0.197107540 0.201841021 0.204525885 0.205411892 0.206692541 0.207050826 0.207161356 0.209079657 0.211328690 0.213073343 0.215969490 0.220889046 0.224847309 0.231528999 0.232725113 0.233678481 0.234740212 0.235735373 0.244594364 0.249375098 0.254661613 0.255388193 0.256730289 0.258867756 0.271378387 0.277896108 0.290072434 0.296338508 0.298447821 0.299493583 0.304308074 0.306285295 0.307546740 0.317608182 0.320600559 0.322864574 0.327551477 0.329007652 0.346055752 0.350639031 0.354749104 0.354779063 0.359275100 0.363857682 0.382106510 0.393481355 0.405662010 0.415829332 0.428196371 0.430343322 0.433822888 0.445332910 0.464051280 0.464147480 0.477885333 0.478805337 0.483705756 0.493076262 0.498033751 0.511116439 0.542569646 0.565164972 0.566781945 0.583179034 0.584611984 0.604442494 0.637606330 0.643978701 0.665423280 0.669741226 0.672657013 0.681415417 0.691773459 0.698844327 0.704241643 0.705345993 0.714671886 0.726391924 0.736978632 0.737782491 0.750681033 0.771579319 0.775844968 0.802243750 0.816808092 0.819890618 0.820702262 0.831260327 0.840403171 0.842890695 0.846291303 0.849265229 0.858207411 0.862765634 0.864339959 0.867347216 0.869431573 0.872340006 0.876222139 0.889451726 0.890640343 0.893790207 0.907058496 0.917820483 0.923907153 0.930702501 0.931689271 0.935962788 0.941141900 0.958501946 0.962772643 0.969656596 0.976021027 0.989356471 0.999630218 1.013110082 1.034079287 1.042635654 1.049336476 1.055257828 1.075779909 1.084212711 1.088667736 1.109993259 1.110589029 1.116356041 1.122413012 1.123320881 1.134259564 1.143194319 1.161236295 1.168787603 1.172727189 1.173282660 1.200417836 1.204514361 1.216296314 1.247302388 1.294458351 1.295730403 1.313049380 1.316988160 1.326285433 1.326963246 1.330138706 1.334504751 1.341018960 1.346016252 1.362288969 1.378771907 1.380848902 1.381238281 1.383308417 1.454109246 1.557491578 1.671860783 1.844694874</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">81</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8877522" y3="-0.95586175" z3="-0.69931661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54691914" y3="-1.96019653" z3="-1.60290997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03261617" y3="-1.00478086" z3="-1.46120185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73905392" y3="1.47366341" z3="-1.09966639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2643903" y3="0.31329405" z3="-0.51228203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62647016" y3="2.75026745" z3="-1.11411184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98632038" y3="2.73772327" z3="-0.85869687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39325839" y3="5.00532898" z3="-0.31660042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79794181" y3="3.86968164" z3="-0.81218074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77968011" y3="5.88317485" z3="-0.09149892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03267744" y3="1.63130351" z3="-1.62215529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12610307" y3="0.37166447" z3="0.23860812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68737422" y3="0.39975997" z3="-0.57682449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61048184" y3="0.74326533" z3="0.38486656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61146993" y3="-0.83795926" z3="-1.44309365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09911064" y3="-2.47392833" z3="-1.28114497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.2003979" y3="-5.49118063" z3="-6.19673382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90013169" y3="-5.05838065" z3="-5.2381646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11669247" y3="-3.92157647" z3="-2.8045311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.85670634" y3="-3.67837685" z3="-5.0913094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5791419" y3="-5.88688265" z3="-4.15979017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20228061" y3="-5.31223961" z3="-2.95262946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47385119" y3="-3.07775083" z3="-3.88100708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.11298921" y3="-3.0094873" z3="-5.91659784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6364385" y3="-6.97435368" z3="-4.25222402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99122603" y3="-5.94718825" z3="-2.08789929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67959423" y3="-3.37564386" z3="-1.57076208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3258713" y3="-3.87045808" z3="-0.84179656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65323249" y3="-4.87695925" z3="-1.11398056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39293718" y3="-3.56253359" z3="0.60383463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45859007" y3="-3.08223795" z3="3.36071071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70453345" y3="-4.59742097" z3="1.49437253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13630214" y3="-2.28257708" z3="1.10477761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16493646" y3="-2.04477347" z3="2.47454496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72874961" y3="-4.35921435" z3="2.86728727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88535053" y3="-5.60670017" z3="1.11433172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07634661" y3="-1.44346224" z3="0.44101442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05197152" y3="-1.03453642" z3="2.83258296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93718447" y3="-5.1830368" z3="3.55466619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.47007906" y3="-2.89932603" z3="4.43914557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42317336" y3="-1.7425022" z3="-3.85440569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50494259" y3="-1.33124366" z3="-2.9482643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3222191" y3="3.74152384" z3="-0.92712782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11190304" y3="-3.03047918" z3="-1.74335087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91498031" y3="-3.1843826" z3="-0.61018816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12745695" y3="-2.28622402" z3="0.29515245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84504708" y3="-0.71135163" z3="0.51753299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.576953" y3="-0.17958748" z3="-1.11501777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.55055273" y3="0.40924446" z3="1.22616488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.198829" y3="-1.04277375" z3="1.76242935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39667139" y3="-4.39274995" z3="-0.35057198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12693177" y3="-4.60411166" z3="0.84821215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.82673046" y3="0.19938396" z3="-1.82275454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30012866" y3="0.63766349" z3="-0.93999051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.1204345" y3="-1.00997041" z3="-1.60369364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64432314" y3="0.53814564" z3="0.60714144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22000022" y3="0.03654231" z3="2.209465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.01185583" y3="1.40514507" z3="1.37444266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66830695" y3="-0.08357866" z3="2.0585024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99661362" y3="-1.68564553" z3="1.3516874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.79755861" y3="-1.52576762" z3="2.67289997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06113061" y3="-4.01942285" z3="0.84386771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52424561" y3="-4.33359748" z3="1.72862859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36006701" y3="-5.67693417" z3="0.86222836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2639782" y3="-2.19424675" z3="-0.16384107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13565308" y3="-3.31127633" z3="-1.00237334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5043773" y3="-4.46905876" z3="-0.56407375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00130192" y3="-4.50398368" z3="0.73062298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13812973" y3="-3.42710422" z3="1.60153706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76459621" y3="-2.2737419" z3="1.14649425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49226163" y3="-3.25802479" z3="-2.03426373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37562691" y3="-5.32463957" z3="-1.2274298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26714369" y3="-5.688165" z3="1.17825044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.72911882" y3="-3.49202849" z3="2.6108714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85016699" y3="-1.41441501" z3="1.81253156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4722818" y3="4.00659912" z3="0.19508215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84737912" y3="3.81337481" z3="0.16011954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42410136" y3="3.35669388" z3="-1.0177361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66827782" y3="3.11358252" z3="-2.16172405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29294722" y3="3.29984212" z3="-2.10661499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.0027256" y3="4.32555425" z3="1.12404133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46914892" y3="3.99162072" z3="1.03690291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86675372" y3="3.10116942" z3="-1.0536434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15842321" y3="2.76990888" z3="-3.07250927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.31471224" y3="3.08475376" z3="-2.98812581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16824896" y3="-5.87964708" z3="2.36921734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78043486" y3="-6.40673918" z3="0.32417444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38761159" y3="2.92632806" z3="-2.13554684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46137524" y3="3.05826224" z3="0.00918213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55445293" y3="0.14768099" z3="-2.10309906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88519927" y3="1.39709148" z3="-1.95623531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70782675" y3="0.06573017" z3="-2.93145029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.16363303" y3="1.16488833" z3="-3.6159583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21899065" y3="-0.8974646" z3="-3.02433706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.04757454" y3="1.08940535" z3="-4.25534287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36499705" y3="2.50929069" z3="-2.70326222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47284941" y3="2.39607945" z3="-3.50849363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83653635" y3="3.46272723" z3="-2.639179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.82004771" y3="3.26365954" z3="-4.07671971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5904716" y3="3.90373275" z3="-0.28194541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78672512" y3="5.05874299" z3="-0.05195703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95761006" y3="3.94948065" z3="0.11195504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50372944" y3="5.09144757" z3="0.64701317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57845662" y3="3.05980853" z3="-0.00848483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55695453" y3="5.10065427" z3="0.94144117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38356779" y3="6.22964398" z3="0.49200023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71447421" y3="6.25256074" z3="0.82754315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.75635005" y3="7.11255395" z3="0.64935821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16253135" y3="7.15733234" z3="1.24771277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30317484" y3="-4.00705874" z3="-2.88650347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49082972" y3="-5.03433948" z3="-2.53869906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16359469" y3="-3.7004515" z3="-3.51089325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41450494" y3="-4.01606457" z3="-3.53753498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67175889" y3="-1.65042735" z3="-2.14881441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40145048" y3="-1.19101822" z3="-2.83873903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51767588" y3="-0.97218544" z3="-1.29446523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7147376" y3="-1.70088264" z3="-2.69271757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8878,-.9559,-.6993;6.5469,-1.9602,-1.6029;6.0326,-1.0048,-1.4612;4.7391,1.4737,-1.0997;4.2644,.3133,-.5123;2.6265,2.7503,-1.1141;3.9863,2.7377,-.8587;2.3933,5.0053,-.3166;1.7979,3.8697,-.8122;1.7797,5.8832,-.0915;2.0327,1.6313,-1.6222;3.1261,.3717,.2386;1.6874,.3998,-.5768;.6105,.7433,.3849;1.6115,-.838,-1.4431;1.0991,-2.4739,-1.2811;2.2004,-5.4912,-6.1967;1.9001,-5.0584,-5.2382;1.1167,-3.9216,-2.8045;1.8567,-3.6784,-5.0913;1.5791,-5.8869,-4.1598;1.2023,-5.3122,-2.9526;1.4739,-3.0778,-3.881;2.113,-3.0095,-5.9166;1.6364,-6.9744,-4.2522;.9912,-5.9472,-2.0879;.6796,-3.3756,-1.5708;-.3259,-3.8705,-.8418;-.6532,-4.877,-1.114;-.3929,-3.5625,.6038;-.4586,-3.0822,3.3607;-.7045,-4.5974,1.4944;-.1363,-2.2826,1.1048;-.1649,-2.0448,2.4745;-.7287,-4.3592,2.8673;-.8854,-5.6067,1.1143;.0763,-1.4435,.441;.052,-1.0345,2.8326;-.9372,-5.183,3.5547;-.4701,-2.8993,4.4391;1.4232,-1.7425,-3.8544;1.5049,-1.3312,-2.9483;.3222,3.7415,-.9271;-2.1119,-3.0305,-1.7434;-2.915,-3.1844,-.6102;-3.1275,-2.2862,.2952;-3.845,-.7114,.5175;-4.577,-.1796,-1.115;-2.5506,.4092,1.2262;-5.1988,-1.0428,1.7624;-3.3967,-4.3927,-.3506;-4.1269,-4.6041,.8482;-3.8267,.1994,-1.8228;-5.3001,.6377,-.94;-5.1204,-1.01,-1.6037;-1.6443,.5381,.6071;-2.22,.0365,2.2095;-3.0119,1.4051,1.3744;-5.6683,-.0836,2.0585;-5.9966,-1.6856,1.3517;-4.7976,-1.5258,2.6729;-5.0611,-4.0194,.8439;-3.5242,-4.3336,1.7286;-4.3601,-5.6769,.8622;4.264,-2.1942,-.1638;4.1357,-3.3113,-1.0024;3.5044,-4.4691,-.5641;3.0013,-4.504,.7306;3.1381,-3.4271,1.6015;3.7646,-2.2737,1.1465;4.4923,-3.258,-2.0343;3.3756,-5.3246,-1.2274;2.2671,-5.6882,1.1783;2.7291,-3.492,2.6109;3.8502,-1.4144,1.8125;-.4723,4.0066,.1951;-1.8474,3.8134,.1601;-2.4241,3.3567,-1.0177;-1.6683,3.1136,-2.1617;-.2929,3.2998,-2.1066;.0027,4.3256,1.124;-2.4691,3.9916,1.0369;-3.8668,3.1012,-1.0536;-2.1584,2.7699,-3.0725;.3147,3.0848,-2.9881;2.1682,-5.8796,2.3692;1.7804,-6.4067,.3242;-4.3876,2.9263,-2.1355;-4.4614,3.0583,.0092;6.5545,.1477,-2.1031;5.8852,1.3971,-1.9562;7.7078,.0657,-2.9315;8.1636,1.1649,-3.616;8.219,-.8975,-3.0243;9.0476,1.0894,-4.2553;6.365,2.5093,-2.7033;7.4728,2.3961,-3.5085;5.8365,3.4627,-2.6392;7.82,3.2637,-4.0767;4.5905,3.9037,-.2819;3.7867,5.0587,-.052;5.9576,3.9495,.112;6.5037,5.0914,.647;6.5785,3.0598,-.0085;7.557,5.1007,.9414;4.3836,6.2296,.492;5.7145,6.2526,.8275;3.7564,7.1126,.6494;6.1625,7.1573,1.2477;-2.3032,-4.0071,-2.8865;-2.4908,-5.0343,-2.5387;-3.1636,-3.7005,-3.5109;-1.4145,-4.0161,-3.5375;-1.6718,-1.6504,-2.1488;-2.4015,-1.191,-2.8387;-1.5177,-.9722,-1.2945;-.7147,-1.7009,-2.6927;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662736488890</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008170660378 0.000754863015 0.022482493884 0.005336877462</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046453573 -0.003600621 0.000152516 0.000222562 0.000325193 0.000338938 0.000370088 0.000422278 0.000512222 0.000642094 0.000710955 0.000806850 0.000926430 0.001074155 0.001230782 0.001234701 0.001264956 0.001308947 0.001463789 0.001502111 0.001727431 0.001813803 0.002016516 0.002196091 0.002621460 0.002888781 0.003057123 0.003329414 0.003625620 0.004067870 0.004341154 0.004659846 0.004950230 0.005119366 0.005545405 0.005804566 0.005902367 0.006301420 0.006786203 0.007402194 0.007781717 0.008361071 0.008534465 0.009143417 0.009353456 0.010124243 0.010275804 0.011479240 0.012021073 0.012869712 0.012950845 0.013612915 0.014356840 0.014505818 0.014879281 0.015372565 0.015658088 0.016073567 0.016400757 0.016675847 0.017470171 0.018021874 0.019007023 0.019593764 0.020419720 0.021497737 0.022376153 0.022459956 0.023086825 0.023515080 0.024618029 0.025977827 0.026369917 0.026680322 0.027357958 0.027785192 0.029851625 0.030425828 0.030685773 0.031852747 0.032560777 0.032764322 0.036818740 0.038374169 0.039529628 0.040530700 0.041003006 0.043266637 0.043834936 0.045278522 0.046159855 0.049669370 0.050035916 0.050725438 0.051377016 0.051575396 0.051814626 0.052281782 0.052388444 0.052573731 0.053833646 0.054743637 0.056493425 0.056834003 0.056955563 0.057235581 0.057735582 0.058574228 0.059220814 0.060339653 0.060599368 0.060914372 0.061472865 0.062370898 0.062671985 0.064201990 0.064247896 0.064649920 0.066039063 0.066135170 0.067951004 0.068646685 0.071236278 0.071918237 0.072667371 0.076503888 0.077406042 0.078520755 0.080670042 0.082299525 0.086282226 0.087407127 0.089492644 0.090840946 0.092849542 0.093500150 0.094336448 0.095277940 0.095641244 0.096601404 0.097361696 0.097724500 0.099584148 0.100910580 0.101285890 0.102599082 0.102810460 0.103943445 0.106739298 0.107422638 0.108513355 0.109782740 0.110582134 0.111204746 0.111729532 0.112627692 0.114644318 0.116373565 0.116584662 0.117379697 0.121880082 0.123057405 0.125572385 0.126767283 0.127809564 0.129059370 0.131762967 0.133506613 0.135688713 0.137003310 0.142180310 0.143506381 0.144538305 0.146042024 0.149546619 0.152174194 0.152737964 0.158582397 0.165410845 0.170539430 0.174422214 0.176322156 0.180595655 0.183259108 0.185776841 0.187652002 0.188702286 0.192809352 0.197111530 0.201844567 0.204658812 0.205412889 0.206702152 0.207160890 0.207203788 0.209081259 0.211376153 0.213074595 0.215973599 0.220907792 0.224847108 0.231529184 0.232725118 0.233711215 0.234777589 0.235761177 0.244593611 0.249384538 0.254683487 0.255391471 0.256731926 0.258873172 0.271378618 0.277965929 0.290074033 0.296368291 0.298457604 0.299497342 0.304328363 0.306302511 0.307547098 0.317624911 0.320605990 0.322893938 0.327563827 0.329043650 0.346057172 0.350642609 0.354749914 0.354786905 0.359275826 0.363858014 0.382143769 0.393595402 0.405666374 0.415835284 0.428326056 0.430350320 0.434042088 0.445347888 0.464056849 0.464206082 0.477885733 0.478904505 0.483901233 0.493111728 0.498034538 0.511147551 0.542573913 0.565182754 0.566785646 0.583213847 0.584966427 0.604453957 0.637871410 0.644017052 0.665435660 0.670381419 0.673154226 0.681421438 0.691797423 0.698845934 0.704241814 0.705377348 0.714732796 0.726780266 0.737011189 0.737914106 0.750681665 0.771579326 0.775845748 0.802243422 0.816808162 0.819910094 0.820713311 0.831299578 0.840403070 0.842891246 0.846291318 0.849266047 0.858207751 0.863523048 0.864404036 0.867352097 0.869804538 0.872443192 0.876378353 0.889518931 0.890641029 0.893807824 0.907357503 0.917828159 0.923907433 0.930788656 0.931992181 0.936087191 0.942853495 0.958501929 0.962848969 0.969656917 0.976052134 0.989384398 0.999634618 1.013110053 1.034082849 1.042636249 1.049341039 1.055258432 1.075819520 1.084215587 1.088669275 1.109994826 1.110591232 1.116359516 1.122413769 1.123322088 1.134259565 1.143195361 1.161239754 1.168801858 1.172759184 1.173298980 1.200420471 1.204562694 1.216315562 1.247302381 1.294463294 1.295731326 1.313077714 1.317048652 1.326285418 1.326963337 1.330138930 1.334504791 1.341018992 1.346016415 1.362297201 1.378771907 1.380849262 1.381239376 1.383339716 1.458385354 1.557491548 1.671860966 1.844706751</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">82</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88775042" y3="-0.95559993" z3="-0.69904859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54586459" y3="-1.96003999" z3="-1.60445761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03132468" y3="-1.00474134" z3="-1.46284021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73719959" y3="1.47361282" z3="-1.10136413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26426635" y3="0.31354848" z3="-0.51200672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62426302" y3="2.75028698" z3="-1.11161804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98472868" y3="2.73783736" z3="-0.85949038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39378484" y3="5.00666654" z3="-0.31771179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79706432" y3="3.8704016" z3="-0.81039113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.78117918" y3="5.8852628" z3="-0.09275798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02901559" y3="1.6309879" z3="-1.61707675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12764367" y3="0.37220525" z3="0.24132381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68711961" y3="0.39907354" z3="-0.57086227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61214109" y3="0.74146895" z3="0.39332342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61025684" y3="-0.83849389" z3="-1.43725486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09933208" y3="-2.47534305" z3="-1.27796504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.21254068" y3="-5.48859974" z3="-6.19291942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90981133" y3="-5.05660234" z3="-5.2347723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12013539" y3="-3.92179455" z3="-2.80215135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.8663153" y3="-3.67672925" z3="-5.08675591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58570588" y3="-5.88597938" z3="-4.1580364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20584628" y3="-5.31234892" z3="-2.95133824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48026802" y3="-3.07713179" z3="-3.87697327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.12501931" y3="-3.00716656" z3="-5.91071566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64295332" y3="-6.97336508" z3="-4.25133246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99253344" y3="-5.94807154" z3="-2.08775085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68054356" y3="-3.37665487" z3="-1.56901139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32654889" y3="-3.87167691" z3="-0.84204564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65267999" y3="-4.87840309" z3="-1.11559615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39542114" y3="-3.56606544" z3="0.60377654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46748053" y3="-3.08841099" z3="3.36085765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71082867" y3="-4.60145861" z3="1.49244508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1378361" y3="-2.28716876" z3="1.10666209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16980154" y3="-2.05063922" z3="2.47658154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73808892" y3="-4.36463804" z3="2.86551165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8914227" y3="-5.61104083" z3="1.11132682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.07948122" y3="-1.44871874" z3="0.44504967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04818369" y3="-1.04161048" z3="2.83638918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94892124" y3="-5.18917984" z3="3.55179839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48111221" y3="-2.90677568" z3="4.43948674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42984764" y3="-1.7418907" z3="-3.84921026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50907327" y3="-1.3314526" z3="-2.94266993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32115899" y3="3.74366286" z3="-0.92339228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1098583" y3="-3.03175941" z3="-1.74371827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91522938" y3="-3.18312933" z3="-0.611104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12642771" y3="-2.28559711" z3="0.29476161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84411136" y3="-0.70794648" z3="0.51456565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.56643767" y3="-0.17524562" z3="-1.12597493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54778129" y3="0.4062653" z3="1.23059928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.20986703" y3="-1.04054157" z3="1.75371637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40144879" y3="-4.38811126" z3="-0.3554392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13217516" y3="-4.60248708" z3="0.8424449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.80424797" y3="0.21312298" z3="-1.82504286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.29705901" y3="0.63745814" z3="-0.95170209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.10159848" y3="-1.00471258" z3="-1.62042315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63560175" y3="0.53876911" z3="0.61848442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22635446" y3="0.02218708" z3="2.21789881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00264565" y3="1.39950697" z3="1.38526916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68285287" y3="-0.09439948" z3="2.06025297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99544131" y3="-1.6935223" z3="1.3311078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.80806255" y3="-1.51609048" z3="2.66306937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06869148" y3="-4.02007222" z3="0.83564769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52979765" y3="-4.32980857" z3="1.72359851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36304799" y3="-5.67666369" z3="0.8572477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26490651" y3="-2.19377466" z3="-0.16196281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13627555" y3="-3.31138624" z3="-0.99959121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50461439" y3="-4.46857643" z3="-0.56042962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00127544" y3="-4.50232995" z3="0.73417139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13883174" y3="-3.42503777" z3="1.60440186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7659316" y3="-2.27234897" z3="1.14860523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49263964" y3="-3.25897032" z3="-2.03160093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37546775" y3="-5.32442229" z3="-1.22321412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2658834" y3="-5.68556483" z3="1.18231187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.72975735" y3="-3.4890908" z3="2.61376682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85200644" y3="-1.41269269" z3="1.81412214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47123424" y3="4.01060549" z3="0.20024408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84620674" y3="3.81729856" z3="0.16927328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42741466" y3="3.36370047" z3="-1.01058651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67267722" y3="3.11660055" z3="-2.15346041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29699928" y3="3.30101774" z3="-2.10057779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00828932" y3="4.32636044" z3="1.13094657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46601915" y3="3.99533096" z3="1.04878774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86837801" y3="3.10539017" z3="-1.0398923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16538283" y3="2.77183263" z3="-3.06240498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.31035079" y3="3.0808322" z3="-2.97822167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16554847" y3="-5.87568407" z3="2.37340213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77974893" y3="-6.40475279" z3="0.32846415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38883549" y3="2.92983916" z3="-2.11730885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4621372" y3="3.0623673" z3="0.02009584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55139331" y3="0.14728969" z3="-2.10692353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88172248" y3="1.39654468" z3="-1.960268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70334946" y3="0.06490067" z3="-2.93720621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.15739648" y3="1.16344445" z3="-3.62383972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21484892" y3="-0.89814618" z3="-3.02982404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0402376" y3="1.0876275" z3="-4.26468568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.35967803" y3="2.50802179" z3="-2.70954786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.4661467" y3="2.3943815" z3="-3.51662672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83090967" y3="3.46128" z3="-2.64573674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.81189241" y3="3.26144728" z3="-4.08650755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.59049903" y3="3.90445649" z3="-0.2857645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78766207" y3="5.06004382" z3="-0.05592349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95854861" y3="3.95026591" z3="0.10512111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50624523" y3="5.09279459" z3="0.63728493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57880881" y3="3.06015869" z3="-0.01521276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56008826" y3="5.10193387" z3="0.92963673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38622185" y3="6.23161798" z3="0.48464811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71786655" y3="6.25451479" z3="0.81738491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.75978557" y3="7.11506861" z3="0.6415951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16722629" y3="7.15975654" z3="1.23511007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30061718" y3="-4.00802016" z3="-2.88739543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48814757" y3="-5.03551712" z3="-2.53976999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16033705" y3="-3.702138" z3="-3.5135197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41104295" y3="-4.01718887" z3="-3.53726555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66862231" y3="-1.65176815" z3="-2.14916677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39771384" y3="-1.19190239" z3="-2.8412072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51594403" y3="-0.97439386" z3="-1.29404376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71115369" y3="-1.70279687" z3="-2.69200225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8878,-.9556,-.699;6.5459,-1.96,-1.6045;6.0313,-1.0047,-1.4628;4.7372,1.4736,-1.1014;4.2643,.3135,-.512;2.6243,2.7503,-1.1116;3.9847,2.7378,-.8595;2.3938,5.0067,-.3177;1.7971,3.8704,-.8104;1.7812,5.8853,-.0928;2.029,1.631,-1.6171;3.1276,.3722,.2413;1.6871,.3991,-.5709;.6121,.7415,.3933;1.6103,-.8385,-1.4373;1.0993,-2.4753,-1.278;2.2125,-5.4886,-6.1929;1.9098,-5.0566,-5.2348;1.1201,-3.9218,-2.8022;1.8663,-3.6767,-5.0868;1.5857,-5.886,-4.158;1.2058,-5.3123,-2.9513;1.4803,-3.0771,-3.877;2.125,-3.0072,-5.9107;1.643,-6.9734,-4.2513;.9925,-5.9481,-2.0878;.6805,-3.3767,-1.569;-.3265,-3.8717,-.842;-.6527,-4.8784,-1.1156;-.3954,-3.5661,.6038;-.4675,-3.0884,3.3609;-.7108,-4.6015,1.4924;-.1378,-2.2872,1.1067;-.1698,-2.0506,2.4766;-.7381,-4.3646,2.8655;-.8914,-5.611,1.1113;.0795,-1.4487,.445;.0482,-1.0416,2.8364;-.9489,-5.1892,3.5518;-.4811,-2.9068,4.4395;1.4298,-1.7419,-3.8492;1.5091,-1.3315,-2.9427;.3212,3.7437,-.9234;-2.1099,-3.0318,-1.7437;-2.9152,-3.1831,-.6111;-3.1264,-2.2856,.2948;-3.8441,-.7079,.5146;-4.5664,-.1752,-1.126;-2.5478,.4063,1.2306;-5.2099,-1.0405,1.7537;-3.4014,-4.3881,-.3554;-4.1322,-4.6025,.8424;-3.8042,.2131,-1.825;-5.2971,.6375,-.9517;-5.1016,-1.0047,-1.6204;-1.6356,.5388,.6185;-2.2264,.0222,2.2179;-3.0026,1.3995,1.3853;-5.6829,-.0944,2.0603;-5.9954,-1.6935,1.3311;-4.8081,-1.5161,2.6631;-5.0687,-4.0201,.8356;-3.5298,-4.3298,1.7236;-4.363,-5.6767,.8572;4.2649,-2.1938,-.162;4.1363,-3.3114,-.9996;3.5046,-4.4686,-.5604;3.0013,-4.5023,.7342;3.1388,-3.425,1.6044;3.7659,-2.2723,1.1486;4.4926,-3.259,-2.0316;3.3755,-5.3244,-1.2232;2.2659,-5.6856,1.1823;2.7298,-3.4891,2.6138;3.852,-1.4127,1.8141;-.4712,4.0106,.2002;-1.8462,3.8173,.1693;-2.4274,3.3637,-1.0106;-1.6727,3.1166,-2.1535;-.297,3.301,-2.1006;.0083,4.3264,1.1309;-2.466,3.9953,1.0488;-3.8684,3.1054,-1.0399;-2.1654,2.7718,-3.0624;.3104,3.0808,-2.9782;2.1655,-5.8757,2.3734;1.7797,-6.4048,.3285;-4.3888,2.9298,-2.1173;-4.4621,3.0624,.0201;6.5514,.1473,-2.1069;5.8817,1.3965,-1.9603;7.7033,.0649,-2.9372;8.1574,1.1634,-3.6238;8.2148,-.8981,-3.0298;9.0402,1.0876,-4.2647;6.3597,2.508,-2.7095;7.4661,2.3944,-3.5166;5.8309,3.4613,-2.6457;7.8119,3.2614,-4.0865;4.5905,3.9045,-.2858;3.7877,5.06,-.0559;5.9585,3.9503,.1051;6.5062,5.0928,.6373;6.5788,3.0602,-.0152;7.5601,5.1019,.9296;4.3862,6.2316,.4846;5.7179,6.2545,.8174;3.7598,7.1151,.6416;6.1672,7.1598,1.2351;-2.3006,-4.008,-2.8874;-2.4881,-5.0355,-2.5398;-3.1603,-3.7021,-3.5135;-1.411,-4.0172,-3.5373;-1.6686,-1.6518,-2.1492;-2.3977,-1.1919,-2.8412;-1.5159,-.9744,-1.294;-.7112,-1.7028,-2.692;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662687637061</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008304449129 0.000951427520 0.025653457620 0.005337866295</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046451120 -0.005436577 0.000155373 0.000220108 0.000324856 0.000339213 0.000370499 0.000422786 0.000514886 0.000642201 0.000711039 0.000806538 0.000931838 0.001076851 0.001233083 0.001239161 0.001265120 0.001311745 0.001467246 0.001508219 0.001738510 0.001823253 0.002011227 0.002196088 0.002666419 0.002966836 0.003283694 0.003445819 0.003644750 0.004137857 0.004347322 0.004661964 0.004957560 0.005132147 0.005539548 0.005803814 0.006009895 0.006426004 0.006798749 0.007418319 0.007782766 0.008360707 0.008572575 0.009146548 0.009353033 0.010121036 0.010327162 0.011488647 0.012176056 0.012885031 0.012967035 0.013820819 0.014367217 0.014553129 0.014889467 0.015381096 0.015660076 0.016072643 0.016399886 0.016723524 0.017472320 0.018024076 0.019024992 0.019741319 0.020419349 0.021633949 0.022399691 0.022491008 0.023088070 0.023515236 0.024618693 0.025977975 0.026370375 0.026680339 0.027371297 0.027788706 0.029855438 0.030425948 0.031265087 0.032055342 0.032622985 0.032802431 0.036887445 0.038380589 0.039548994 0.040538284 0.041011204 0.043484636 0.043986889 0.045281196 0.046159802 0.049669369 0.050472145 0.050725039 0.051383933 0.051577578 0.051814588 0.052281829 0.052388444 0.052574470 0.053834139 0.054744498 0.056493410 0.056834341 0.056961212 0.057235081 0.057736473 0.058590290 0.059221585 0.060365466 0.060636629 0.060991628 0.061537992 0.062370084 0.062870351 0.064246903 0.064333809 0.064688557 0.066085953 0.066552759 0.067952755 0.068655263 0.071276614 0.071932690 0.072667290 0.076504047 0.078177239 0.078900004 0.080670580 0.082303562 0.086379735 0.087428947 0.089494892 0.090840966 0.092849547 0.093515405 0.094337185 0.095278600 0.095656854 0.096604180 0.097364309 0.097794614 0.099581429 0.100914326 0.101289035 0.102615586 0.102826332 0.103944354 0.106741754 0.107472128 0.108751017 0.110182331 0.110580226 0.111636994 0.112588270 0.113679568 0.114866283 0.116403418 0.116713737 0.117421958 0.121991099 0.123089169 0.125613216 0.126818468 0.127809982 0.129145139 0.131769888 0.133511476 0.135688565 0.137005452 0.142186196 0.143694669 0.144538578 0.146045048 0.149528962 0.152517971 0.152745551 0.158551774 0.165438074 0.170557752 0.174437081 0.176370016 0.180601827 0.183264077 0.185805674 0.187653685 0.188710454 0.192840446 0.197113477 0.201845574 0.204812421 0.205422417 0.206708009 0.207161626 0.207389563 0.209082865 0.211386639 0.213100620 0.216022978 0.220945504 0.224853929 0.231532449 0.232725147 0.233828756 0.235032978 0.236073329 0.244620406 0.249389980 0.254695654 0.255391785 0.256735534 0.258873136 0.271378852 0.278046878 0.290106216 0.296443989 0.298491210 0.299497258 0.304351501 0.306322878 0.307547579 0.317654015 0.320616408 0.322941422 0.327582442 0.329111796 0.346060261 0.350642465 0.354751990 0.354804577 0.359277456 0.363862719 0.382142877 0.394884892 0.405681765 0.415866857 0.428326292 0.430353896 0.434040323 0.445352286 0.464056628 0.464249078 0.477886054 0.479120662 0.484508564 0.493126297 0.498035268 0.511184857 0.542576272 0.565193929 0.566790621 0.583228389 0.585235600 0.604468968 0.638281701 0.644042420 0.665435997 0.670685750 0.673655459 0.681433726 0.691810118 0.698905482 0.704241987 0.705386226 0.714784597 0.727308482 0.737055060 0.738113547 0.750682103 0.771579345 0.775847434 0.802260236 0.816808515 0.819923378 0.820723565 0.831331767 0.840403518 0.842915854 0.846294429 0.849280552 0.858207769 0.864217682 0.865217276 0.867363727 0.870127114 0.872556714 0.876662524 0.889660014 0.890644004 0.893813168 0.907536963 0.917828161 0.923907446 0.930843168 0.931999430 0.936314126 0.944894837 0.958501939 0.963190337 0.969670645 0.976056026 0.989388639 0.999636591 1.013110415 1.034083493 1.042636267 1.049342407 1.055259113 1.075895621 1.084219937 1.088671468 1.109999441 1.110597440 1.116363746 1.122414742 1.123324293 1.134259759 1.143195389 1.161241157 1.168823598 1.172781218 1.173323562 1.200423204 1.204626432 1.216315458 1.247302388 1.294540415 1.295731478 1.313101940 1.317160575 1.326285918 1.326977371 1.330139069 1.334509546 1.341019151 1.346019108 1.362326079 1.378775880 1.380857903 1.381261000 1.383563707 1.462206628 1.557491895 1.671860999 1.845483178</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">83</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88803824" y3="-0.95532337" z3="-0.69872177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54504082" y3="-1.95967017" z3="-1.60631608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03028769" y3="-1.00452033" z3="-1.46450588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73593018" y3="1.47342802" z3="-1.10270028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26446229" y3="0.31375482" z3="-0.5115345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62299403" y3="2.74938943" z3="-1.11081574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98367318" y3="2.73745171" z3="-0.86081142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39384862" y3="5.00725459" z3="-0.32045871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7966866" y3="3.87004909" z3="-0.81018718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.78150699" y3="5.88611413" z3="-0.09599864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02587719" y3="1.62974035" z3="-1.61331255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12920702" y3="0.37292487" z3="0.24382804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68720955" y3="0.39832726" z3="-0.56558816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61388912" y3="0.73989254" z3="0.40073007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60943925" y3="-0.83961349" z3="-1.43123063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10023508" y3="-2.477091" z3="-1.27434629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.22603633" y3="-5.48704509" z3="-6.18826951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.92045485" y3="-5.05570813" z3="-5.23072758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12413416" y3="-3.92251322" z3="-2.79945897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.87687204" y3="-3.67594435" z3="-5.08178991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59283415" y3="-5.88581294" z3="-4.15559177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20969025" y3="-5.31296961" z3="-2.94956138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48747959" y3="-3.0771474" z3="-3.87267094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.13826596" y3="-3.00577997" z3="-5.90443044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65003646" y3="-6.97314901" z3="-4.24951205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99384152" y3="-5.94930066" z3="-2.08703336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68222109" y3="-3.37833773" z3="-1.5667742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32623636" y3="-3.87402925" z3="-0.84196553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65181321" y3="-4.88045006" z3="-1.11695392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39760619" y3="-3.56979983" z3="0.60418996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47699806" y3="-3.09543675" z3="3.36153858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71736772" y3="-4.60578666" z3="1.49059053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13830726" y3="-2.29231345" z3="1.10956847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17405762" y3="-2.05741827" z3="2.47962908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.74847086" y3="-4.37045361" z3="2.86376084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8987396" y3="-5.6141096" z3="1.10746947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08261292" y3="-1.45327488" z3="0.449126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04472668" y3="-1.04921738" z3="2.84143283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.96308902" y3="-5.19525009" z3="3.54816676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.49400221" y3="-2.91473378" z3="4.44024959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43758752" y3="-1.74192072" z3="-3.84425827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51323774" y3="-1.33182707" z3="-2.93706455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32057001" y3="3.74166413" z3="-0.91867845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10688413" y3="-3.03282262" z3="-1.74606101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91503731" y3="-3.18321512" z3="-0.61580172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1277402" y3="-2.28320428" z3="0.28780079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84057455" y3="-0.70743506" z3="0.51065814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.55657235" y3="-0.16786184" z3="-1.12390193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54510228" y3="0.40128675" z3="1.23881374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.2105137" y3="-1.0420752" z3="1.74105769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40209918" y3="-4.38927975" z3="-0.35844997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13717929" y3="-4.60052941" z3="0.8374674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.80152749" y3="0.21841458" z3="-1.82001019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28569048" y3="0.64224797" z3="-0.95033261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.08446833" y3="-1.00053001" z3="-1.62688109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63042788" y3="0.52966475" z3="0.62981876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22725164" y3="0.01950415" z3="2.22248078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00045226" y3="1.40002773" z3="1.38669004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69109047" y3="-0.08550174" z3="2.03459951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99937637" y3="-1.68788195" z3="1.31958093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.81859045" y3="-1.52341429" z3="2.65786084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0705485" y3="-4.01518696" z3="0.83073262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53711526" y3="-4.33190564" z3="1.71961963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37204713" y3="-5.67222973" z3="0.84926785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26614216" y3="-2.19325773" z3="-0.16007806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13716118" y3="-3.31158121" z3="-0.99673531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50514546" y3="-4.46820755" z3="-0.55653455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0015939" y3="-4.5006085" z3="0.7380058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13988097" y3="-3.42270545" z3="1.60746065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7676279" y3="-2.27071458" z3="1.15075661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49322135" y3="-3.26014804" z3="-2.0289073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37558913" y3="-5.32455412" z3="-1.21864549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26485666" y3="-5.68280642" z3="1.18675412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73070718" y3="-3.48570781" z3="2.61685306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85431135" y3="-1.41063307" z3="1.81566256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46740408" y3="4.00493011" z3="0.21111005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84286352" y3="3.81316369" z3="0.18328288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4271617" y3="3.3620483" z3="-0.99570807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67827794" y3="3.12125585" z3="-2.14731679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3017209" y3="3.30301201" z3="-2.0973358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01433326" y3="4.32096474" z3="1.13931161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45966327" y3="3.9905419" z3="1.06541417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87128384" y3="3.1116098" z3="-1.02781348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17667795" y3="2.78474266" z3="-3.06045635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30166622" y3="3.08680963" z3="-2.98285266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16283555" y3="-5.87127179" z3="2.37795162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77931694" y3="-6.40276058" z3="0.33320415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40060057" y3="2.95114115" z3="-2.11066948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46030967" y3="3.06293261" z3="0.03564166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54865684" y3="0.14718274" z3="-2.11054235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87869151" y3="1.3962197" z3="-1.96379895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69908987" y3="0.06465877" z3="-2.94289601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.15124719" y3="1.16281368" z3="-3.63139846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21092341" y3="-0.89819165" z3="-3.03555404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.03296882" y3="1.08689937" z3="-4.27375129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.35448134" y3="2.50724953" z3="-2.71512923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.45948919" y3="2.39345231" z3="-3.52416373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82523153" y3="3.46023533" z3="-2.6513679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.80366741" y3="3.26014627" z3="-4.09556214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.59024087" y3="3.90489977" z3="-0.2897525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78804144" y3="5.06100828" z3="-0.06074281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9587267" y3="3.95110048" z3="0.09917767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50748867" y3="5.09437223" z3="0.62848468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57853719" y3="3.06067685" z3="-0.02040755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5616989" y3="5.10378167" z3="0.91929969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38762726" y3="6.2333897" z3="0.47691247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71968603" y3="6.25658588" z3="0.80763763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.761725" y3="7.1173369" z3="0.63326867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16993923" y3="7.16246124" z3="1.22293841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29772083" y3="-4.00903347" z3="-2.88949945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48658869" y3="-5.03611199" z3="-2.54117636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15655945" y3="-3.70234421" z3="-3.51574678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40766514" y3="-4.01889345" z3="-3.53856865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66371875" y3="-1.65341644" z3="-2.1507921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39176492" y3="-1.19190248" z3="-2.84154841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51039994" y3="-0.9755596" z3="-1.29535722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70745287" y3="-1.70466184" z3="-2.6943799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.888,-.9553,-.6987;6.545,-1.9597,-1.6063;6.0303,-1.0045,-1.4645;4.7359,1.4734,-1.1027;4.2645,.3138,-.5115;2.623,2.7494,-1.1108;3.9837,2.7375,-.8608;2.3938,5.0073,-.3205;1.7967,3.87,-.8102;1.7815,5.8861,-.096;2.0259,1.6297,-1.6133;3.1292,.3729,.2438;1.6872,.3983,-.5656;.6139,.7399,.4007;1.6094,-.8396,-1.4312;1.1002,-2.4771,-1.2743;2.226,-5.487,-6.1883;1.9205,-5.0557,-5.2307;1.1241,-3.9225,-2.7995;1.8769,-3.6759,-5.0818;1.5928,-5.8858,-4.1556;1.2097,-5.313,-2.9496;1.4875,-3.0771,-3.8727;2.1383,-3.0058,-5.9044;1.65,-6.9731,-4.2495;.9938,-5.9493,-2.087;.6822,-3.3783,-1.5668;-.3262,-3.874,-.842;-.6518,-4.8805,-1.117;-.3976,-3.5698,.6042;-.477,-3.0954,3.3615;-.7174,-4.6058,1.4906;-.1383,-2.2923,1.1096;-.1741,-2.0574,2.4796;-.7485,-4.3705,2.8638;-.8987,-5.6141,1.1075;.0826,-1.4533,.4491;.0447,-1.0492,2.8414;-.9631,-5.1953,3.5482;-.494,-2.9147,4.4402;1.4376,-1.7419,-3.8443;1.5132,-1.3318,-2.9371;.3206,3.7417,-.9187;-2.1069,-3.0328,-1.7461;-2.915,-3.1832,-.6158;-3.1277,-2.2832,.2878;-3.8406,-.7074,.5107;-4.5566,-.1679,-1.1239;-2.5451,.4013,1.2388;-5.2105,-1.0421,1.7411;-3.4021,-4.3893,-.3584;-4.1372,-4.6005,.8375;-3.8015,.2184,-1.82;-5.2857,.6422,-.9503;-5.0845,-1.0005,-1.6269;-1.6304,.5297,.6298;-2.2273,.0195,2.2225;-3.0005,1.4,1.3867;-5.6911,-.0855,2.0346;-5.9994,-1.6879,1.3196;-4.8186,-1.5234,2.6579;-5.0705,-4.0152,.8307;-3.5371,-4.3319,1.7196;-4.372,-5.6722,.8493;4.2661,-2.1933,-.1601;4.1372,-3.3116,-.9967;3.5051,-4.4682,-.5565;3.0016,-4.5006,.738;3.1399,-3.4227,1.6075;3.7676,-2.2707,1.1508;4.4932,-3.2601,-2.0289;3.3756,-5.3246,-1.2186;2.2649,-5.6828,1.1868;2.7307,-3.4857,2.6169;3.8543,-1.4106,1.8157;-.4674,4.0049,.2111;-1.8429,3.8132,.1833;-2.4272,3.362,-.9957;-1.6783,3.1213,-2.1473;-.3017,3.303,-2.0973;.0143,4.321,1.1393;-2.4597,3.9905,1.0654;-3.8713,3.1116,-1.0278;-2.1767,2.7847,-3.0605;.3017,3.0868,-2.9829;2.1628,-5.8713,2.378;1.7793,-6.4028,.3332;-4.4006,2.9511,-2.1107;-4.4603,3.0629,.0356;6.5487,.1472,-2.1105;5.8787,1.3962,-1.9638;7.6991,.0647,-2.9429;8.1512,1.1628,-3.6314;8.2109,-.8982,-3.0356;9.033,1.0869,-4.2738;6.3545,2.5072,-2.7151;7.4595,2.3935,-3.5242;5.8252,3.4602,-2.6514;7.8037,3.2601,-4.0956;4.5902,3.9049,-.2898;3.788,5.061,-.0607;5.9587,3.9511,.0992;6.5075,5.0944,.6285;6.5785,3.0607,-.0204;7.5617,5.1038,.9193;4.3876,6.2334,.4769;5.7197,6.2566,.8076;3.7617,7.1173,.6333;6.1699,7.1625,1.2229;-2.2977,-4.009,-2.8895;-2.4866,-5.0361,-2.5412;-3.1566,-3.7023,-3.5157;-1.4077,-4.0189,-3.5386;-1.6637,-1.6534,-2.1508;-2.3918,-1.1919,-2.8415;-1.5104,-.9756,-1.2954;-.7075,-1.7047,-2.6944;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662662913619</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.008935258735 0.001125483094 0.023384940779 0.005337061956</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046491055 -0.005883604 0.000160633 0.000240329 0.000327811 0.000339171 0.000373424 0.000423301 0.000514886 0.000642901 0.000728169 0.000807556 0.000935541 0.001077064 0.001235530 0.001242389 0.001266689 0.001315036 0.001469140 0.001509973 0.001750759 0.001893921 0.002115971 0.002214214 0.002672923 0.002966558 0.003360426 0.003501792 0.003656225 0.004292645 0.004348975 0.004661539 0.004959124 0.005150503 0.005719215 0.005805263 0.006094502 0.006426519 0.006814038 0.007421789 0.007782702 0.008363609 0.008573035 0.009151569 0.009353847 0.010134986 0.010357661 0.011490584 0.012215453 0.012884570 0.012990166 0.013927706 0.014374978 0.014623676 0.014948324 0.015433097 0.015659713 0.016084332 0.016402493 0.016962579 0.017482230 0.018023990 0.019023370 0.019839947 0.020422230 0.021681199 0.022422021 0.022532725 0.023105880 0.023516108 0.024619140 0.025977986 0.026370647 0.026681101 0.027393773 0.027790897 0.029861202 0.030426139 0.031250682 0.032255557 0.032666476 0.032941186 0.036965327 0.038412484 0.039658557 0.040558399 0.041061676 0.043448990 0.044095900 0.045281151 0.046165911 0.049669367 0.050636502 0.050724867 0.051400677 0.051584218 0.051815219 0.052281896 0.052388670 0.052574612 0.053835384 0.054746538 0.056493439 0.056835823 0.056963126 0.057241943 0.057736930 0.058594168 0.059222154 0.060373749 0.060636116 0.061073990 0.061572379 0.062384354 0.063389535 0.064252329 0.064331820 0.064682068 0.066094554 0.066633465 0.067956596 0.068654696 0.071330680 0.071946592 0.072668744 0.076504317 0.078280791 0.079864748 0.080683544 0.082327797 0.086594610 0.087501648 0.089495838 0.090840692 0.092849563 0.093524376 0.094337939 0.095278784 0.095679630 0.096604338 0.097394365 0.097877900 0.099618966 0.100928200 0.101292400 0.102677143 0.102837029 0.103944572 0.106751421 0.107466412 0.108852453 0.110377294 0.110595775 0.111664298 0.112630981 0.114316917 0.115639090 0.116441162 0.117220992 0.117727202 0.122374433 0.123239304 0.125677395 0.126974195 0.127821824 0.129538914 0.131849015 0.133526374 0.135688647 0.137011135 0.142206822 0.144033559 0.144539182 0.146044971 0.149932366 0.152740656 0.153205670 0.158919319 0.165531473 0.170598596 0.174495256 0.176446851 0.180635742 0.183263786 0.185803377 0.187653788 0.188728999 0.192836626 0.197116997 0.201846973 0.204931541 0.205450258 0.206715448 0.207162124 0.207615327 0.209083838 0.211387910 0.213140170 0.216262309 0.221011051 0.224875066 0.231535036 0.232725351 0.233905819 0.235221979 0.236552725 0.244736211 0.249390338 0.254696499 0.255392561 0.256764091 0.258899212 0.271379386 0.278082748 0.290219864 0.296552903 0.298510375 0.299503057 0.304352917 0.306335707 0.307547551 0.317651459 0.320636036 0.323013397 0.327580693 0.329167149 0.346064481 0.350643428 0.354772651 0.355071505 0.359282973 0.363870235 0.382153907 0.397000153 0.405786571 0.416569527 0.428432039 0.430354208 0.434223940 0.445353173 0.464061373 0.464261732 0.477886145 0.479347253 0.485664999 0.493137158 0.498035939 0.511227870 0.542578551 0.565202961 0.566801141 0.583231679 0.585396453 0.604495582 0.638806612 0.644047314 0.665436444 0.670962802 0.674164474 0.681445657 0.691814902 0.698993934 0.704242028 0.705463953 0.714824490 0.727917917 0.737076027 0.738237188 0.750682118 0.771579383 0.775849472 0.802285723 0.816809776 0.819924645 0.820724802 0.831335188 0.840405669 0.842971872 0.846310229 0.849314682 0.858208211 0.864288579 0.866909286 0.867434711 0.871314708 0.872848798 0.877249536 0.889789465 0.890644077 0.893815303 0.908272592 0.917828342 0.923909597 0.930861119 0.932019213 0.936433284 0.946083839 0.958502791 0.963801159 0.969694947 0.976056451 0.989388656 0.999637712 1.013110468 1.034086275 1.042636948 1.049348745 1.055259106 1.075926365 1.084234631 1.088681355 1.110005722 1.110604520 1.116364724 1.122417296 1.123328327 1.134260210 1.143195546 1.161241130 1.168847548 1.172787273 1.173355769 1.200426042 1.204706460 1.216318683 1.247302371 1.294647206 1.295732896 1.313235186 1.317684911 1.326288149 1.327034104 1.330139412 1.334512240 1.341020611 1.346021636 1.362337638 1.378777394 1.380868155 1.381283930 1.383960544 1.465397507 1.557493838 1.671861090 1.849217268</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">84</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88791954" y3="-0.95535944" z3="-0.69932584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54336617" y3="-1.95978099" z3="-1.60975261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02860917" y3="-1.0046944" z3="-1.46749596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73398186" y3="1.47299003" z3="-1.10514645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26430356" y3="0.31369968" z3="-0.51186976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62022926" y3="2.74891861" z3="-1.10890388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98189171" y3="2.73708061" z3="-0.86257683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39338049" y3="5.00807055" z3="-0.32049682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79439963" y3="3.87025323" z3="-0.80665974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.78153575" y3="5.88739271" z3="-0.09616171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02211066" y3="1.62877679" z3="-1.60908273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13074855" y3="0.37332527" z3="0.2460271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68680495" y3="0.39749667" z3="-0.56001176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.615358" y3="0.73825238" z3="0.40854255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60787069" y3="-0.84085301" z3="-1.42515438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10169499" y3="-2.47901474" z3="-1.27069657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.2411004" y3="-5.48635993" z3="-6.18293168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.93244512" y3="-5.05562017" z3="-5.22610372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.129009" y3="-3.92388779" z3="-2.79648674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.88888356" y3="-3.67597973" z3="-5.07629972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60086431" y3="-5.88641151" z3="-4.15267208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21420454" y3="-5.31428893" z3="-2.94745115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49584709" y3="-3.07781628" z3="-3.86799501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.15323661" y3="-3.00529463" z3="-5.89759174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65784925" y3="-6.97370003" z3="-4.2471969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99553844" y3="-5.95119221" z3="-2.08605407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68472383" y3="-3.38059296" z3="-1.56417676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32377646" y3="-3.8773003" z3="-0.84119116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65041737" y3="-4.882731" z3="-1.11832431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39898574" y3="-3.57403879" z3="0.60471601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.48589746" y3="-3.10299395" z3="3.36251851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72406674" y3="-4.61033904" z3="1.48896272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13888042" y3="-2.29723499" z3="1.11223147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1783156" y3="-2.06413077" z3="2.48259957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.75881728" y3="-4.37682365" z3="2.86234236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90745651" y3="-5.61728709" z3="1.10367872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08525776" y3="-1.4575503" z3="0.45330853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0409231" y3="-1.05645711" z3="2.84626218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.97809883" y3="-5.20177953" z3="3.54510758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50620941" y3="-2.92364138" z3="4.44142113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44649078" y3="-1.74263363" z3="-3.83905153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5183208" y3="-1.33275976" z3="-2.93138825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31779466" y3="3.74379677" z3="-0.91255821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10642439" y3="-3.03292005" z3="-1.74829844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91512712" y3="-3.18294438" z3="-0.6185591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12605637" y3="-2.2854153" z3="0.28718618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83994217" y3="-0.70671295" z3="0.50979545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.54764834" y3="-0.16308117" z3="-1.13031561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54800419" y3="0.40010629" z3="1.23799138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.2134371" y3="-1.04009438" z3="1.73368712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40571208" y3="-4.3875246" z3="-0.36398582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14195192" y3="-4.59751077" z3="0.83189882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.77814255" y3="0.23715192" z3="-1.81668134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28175544" y3="0.64618986" z3="-0.95913108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.07311522" y3="-0.98949844" z3="-1.63817123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63313543" y3="0.52365402" z3="0.6314721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23469587" y3="0.01860252" z3="2.22538573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00243722" y3="1.39528555" z3="1.38965245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67787511" y3="-0.0875932" z3="2.03390239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00576405" y3="-1.68087444" z3="1.30550083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.82427935" y3="-1.53151564" z3="2.64008341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07514093" y3="-4.01083493" z3="0.8221036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54177822" y3="-4.32626154" z3="1.71533499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37767666" y3="-5.67099897" z3="0.84735712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26711252" y3="-2.19308549" z3="-0.15887071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13801896" y3="-3.31241503" z3="-0.99429409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50593748" y3="-4.46858084" z3="-0.55280756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0020388" y3="-4.49937342" z3="0.74162951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14088859" y3="-3.42064533" z3="1.61007583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76910176" y3="-2.26931442" z3="1.15226554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49380547" y3="-3.26220421" z3="-2.02663833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37626514" y3="-5.32569686" z3="-1.21402423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2640011" y3="-5.68054138" z3="1.19118376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73161366" y3="-3.48247399" z3="2.61949628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85625716" y3="-1.40868585" z3="1.8164369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46853891" y3="4.00755157" z3="0.21548189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84449382" y3="3.81876285" z3="0.18895423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43171633" y3="3.3716781" z3="-0.98974132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68267059" y3="3.12623756" z3="-2.13615561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30618899" y3="3.30639838" z3="-2.08916331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01549273" y3="4.31936635" z3="1.14485964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45869251" y3="3.9935453" z3="1.07315175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87409578" y3="3.11931432" z3="-1.01477454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17741996" y3="2.78338308" z3="-3.04171369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29589725" y3="3.08928675" z3="-2.97286307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16021609" y3="-5.86709998" z3="2.38251248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77919397" y3="-6.40149541" z3="0.3380437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39954834" y3="2.95564542" z3="-2.09060715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46147929" y3="3.06249494" z3="0.0514664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54523282" y3="0.14671258" z3="-2.11552622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87505616" y3="1.3955764" z3="-1.96838873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69390655" y3="0.064117" z3="-2.95035333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.14406824" y3="1.16199574" z3="-3.64064379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20596994" y3="-0.89856734" z3="-3.04353725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.02439166" y3="1.08601514" z3="-4.28495176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3487743" y3="2.50632759" z3="-2.7213749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.45207027" y3="2.39245688" z3="-3.53273294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.819234" y3="3.45912976" z3="-2.6569855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.79459749" y3="3.25892148" z3="-4.10547267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.59000855" y3="3.90501473" z3="-0.29381559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78852957" y3="5.06177996" z3="-0.06452459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95927794" y3="3.95110496" z3="0.09280726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50929495" y3="5.09491353" z3="0.61983929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57855815" y3="3.06014396" z3="-0.02646291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56397668" y3="5.10422898" z3="0.90913841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38945785" y3="6.23474659" z3="0.47035511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72221219" y3="6.25783553" z3="0.79871247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76392352" y3="7.11908286" z3="0.62667995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17342727" y3="7.16414647" z3="1.21210193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29522191" y3="-4.0098518" z3="-2.89177301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48561634" y3="-5.03660985" z3="-2.54370591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15297276" y3="-3.70307942" z3="-3.52010172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40410181" y3="-4.02102068" z3="-3.53965066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66002015" y3="-1.65413715" z3="-2.15237001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38685838" y3="-1.1911409" z3="-2.84423476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50458589" y3="-0.97818106" z3="-1.29713752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70259642" y3="-1.70776253" z3="-2.69495354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8879,-.9554,-.6993;6.5434,-1.9598,-1.6098;6.0286,-1.0047,-1.4675;4.734,1.473,-1.1051;4.2643,.3137,-.5119;2.6202,2.7489,-1.1089;3.9819,2.7371,-.8626;2.3934,5.0081,-.3205;1.7944,3.8703,-.8067;1.7815,5.8874,-.0962;2.0221,1.6288,-1.6091;3.1307,.3733,.246;1.6868,.3975,-.56;.6154,.7383,.4085;1.6079,-.8409,-1.4252;1.1017,-2.479,-1.2707;2.2411,-5.4864,-6.1829;1.9324,-5.0556,-5.2261;1.129,-3.9239,-2.7965;1.8889,-3.676,-5.0763;1.6009,-5.8864,-4.1527;1.2142,-5.3143,-2.9475;1.4958,-3.0778,-3.868;2.1532,-3.0053,-5.8976;1.6578,-6.9737,-4.2472;.9955,-5.9512,-2.0861;.6847,-3.3806,-1.5642;-.3238,-3.8773,-.8412;-.6504,-4.8827,-1.1183;-.399,-3.574,.6047;-.4859,-3.103,3.3625;-.7241,-4.6103,1.489;-.1389,-2.2972,1.1122;-.1783,-2.0641,2.4826;-.7588,-4.3768,2.8623;-.9075,-5.6173,1.1037;.0853,-1.4576,.4533;.0409,-1.0565,2.8463;-.9781,-5.2018,3.5451;-.5062,-2.9236,4.4414;1.4465,-1.7426,-3.8391;1.5183,-1.3328,-2.9314;.3178,3.7438,-.9126;-2.1064,-3.0329,-1.7483;-2.9151,-3.1829,-.6186;-3.1261,-2.2854,.2872;-3.8399,-.7067,.5098;-4.5476,-.1631,-1.1303;-2.548,.4001,1.238;-5.2134,-1.0401,1.7337;-3.4057,-4.3875,-.364;-4.142,-4.5975,.8319;-3.7781,.2372,-1.8167;-5.2818,.6462,-.9591;-5.0731,-.9895,-1.6382;-1.6331,.5237,.6315;-2.2347,.0186,2.2254;-3.0024,1.3953,1.3897;-5.6779,-.0876,2.0339;-6.0058,-1.6809,1.3055;-4.8243,-1.5315,2.6401;-5.0751,-4.0108,.8221;-3.5418,-4.3263,1.7153;-4.3777,-5.671,.8474;4.2671,-2.1931,-.1589;4.138,-3.3124,-.9943;3.5059,-4.4686,-.5528;3.002,-4.4994,.7416;3.1409,-3.4206,1.6101;3.7691,-2.2693,1.1523;4.4938,-3.2622,-2.0266;3.3763,-5.3257,-1.214;2.264,-5.6805,1.1912;2.7316,-3.4825,2.6195;3.8563,-1.4087,1.8164;-.4685,4.0076,.2155;-1.8445,3.8188,.189;-2.4317,3.3717,-.9897;-1.6827,3.1262,-2.1362;-.3062,3.3064,-2.0892;.0155,4.3194,1.1449;-2.4587,3.9935,1.0732;-3.8741,3.1193,-1.0148;-2.1774,2.7834,-3.0417;.2959,3.0893,-2.9729;2.1602,-5.8671,2.3825;1.7792,-6.4015,.338;-4.3995,2.9556,-2.0906;-4.4615,3.0625,.0515;6.5452,.1467,-2.1155;5.8751,1.3956,-1.9684;7.6939,.0641,-2.9504;8.1441,1.162,-3.6406;8.206,-.8986,-3.0435;9.0244,1.086,-4.285;6.3488,2.5063,-2.7214;7.4521,2.3925,-3.5327;5.8192,3.4591,-2.657;7.7946,3.2589,-4.1055;4.59,3.905,-.2938;3.7885,5.0618,-.0645;5.9593,3.9511,.0928;6.5093,5.0949,.6198;6.5786,3.0601,-.0265;7.564,5.1042,.9091;4.3895,6.2347,.4704;5.7222,6.2578,.7987;3.7639,7.1191,.6267;6.1734,7.1641,1.2121;-2.2952,-4.0099,-2.8918;-2.4856,-5.0366,-2.5437;-3.153,-3.7031,-3.5201;-1.4041,-4.021,-3.5397;-1.66,-1.6541,-2.1524;-2.3869,-1.1911,-2.8442;-1.5046,-.9782,-1.2971;-.7026,-1.7078,-2.695;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662668092278</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011696875963 0.001129102843 0.016743956337 0.005337074246</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.046733617 -0.005081108 0.000165809 0.000231458 0.000324919 0.000340472 0.000370605 0.000423754 0.000524024 0.000643118 0.000736564 0.000812889 0.000936354 0.001078218 0.001235401 0.001246292 0.001268018 0.001316980 0.001469183 0.001509891 0.001751187 0.001897994 0.002185422 0.002272971 0.002716190 0.002982977 0.003380964 0.003532609 0.003657529 0.004282310 0.004350179 0.004666625 0.004957492 0.005157348 0.005747392 0.005815522 0.006380902 0.006605927 0.006828163 0.007421647 0.007785503 0.008362791 0.008579770 0.009156473 0.009353804 0.010134775 0.010357531 0.011492114 0.012215717 0.012885768 0.012990383 0.013923469 0.014374928 0.014631378 0.014979304 0.015453979 0.015659561 0.016110311 0.016407155 0.017177976 0.017502593 0.018024074 0.019029414 0.019877544 0.020428446 0.021682306 0.022432773 0.022529671 0.023104975 0.023515713 0.024618994 0.025978116 0.026381242 0.026683134 0.027436852 0.027791808 0.029869479 0.030427287 0.031263874 0.032324719 0.032680522 0.033111043 0.036984768 0.038469831 0.039896733 0.040573326 0.041199044 0.043627336 0.044128990 0.045288514 0.046195846 0.049669381 0.050622795 0.050744090 0.051409779 0.051589207 0.051815824 0.052281981 0.052389471 0.052574885 0.053850963 0.054771507 0.056493521 0.056844636 0.057007119 0.057286176 0.057736947 0.058593904 0.059222234 0.060378650 0.060636129 0.061061696 0.061576041 0.062399962 0.063791814 0.064287791 0.064441588 0.064870861 0.066100343 0.066690610 0.067963350 0.068662957 0.071355544 0.071955822 0.072673244 0.076504922 0.078277962 0.080410523 0.080748986 0.082385492 0.086738986 0.087679008 0.089497559 0.090841412 0.092849764 0.093550577 0.094338436 0.095279348 0.095699673 0.096604148 0.097402006 0.097980498 0.099673642 0.100932566 0.101296003 0.102745240 0.102854258 0.103945901 0.106827372 0.107531276 0.108910237 0.110456975 0.110831101 0.111693704 0.112684384 0.114313793 0.115694807 0.116448184 0.117313296 0.117984684 0.122622475 0.123397892 0.125669706 0.127065780 0.127835611 0.129875404 0.132124634 0.133577309 0.135691604 0.137010865 0.142219511 0.144118205 0.144540336 0.146045264 0.150048808 0.152741397 0.153494852 0.159227215 0.165627662 0.170634134 0.174541413 0.176509874 0.180668884 0.183264188 0.185804289 0.187653797 0.188739093 0.192937083 0.197119115 0.201846777 0.205016908 0.205464727 0.206720397 0.207162157 0.208005780 0.209084550 0.211405523 0.213156135 0.216481421 0.221040684 0.224893370 0.231537128 0.232725387 0.233937132 0.235295319 0.236845239 0.244851469 0.249390286 0.254696577 0.255393371 0.256799712 0.258930360 0.271379372 0.278092262 0.290364217 0.296644277 0.298510772 0.299537870 0.304366318 0.306342199 0.307547568 0.317658190 0.320667351 0.323121739 0.327593387 0.329194904 0.346067973 0.350643694 0.354774072 0.355556251 0.359288153 0.363872892 0.382154179 0.397992119 0.405837623 0.418467721 0.428894511 0.430378891 0.435410729 0.445371178 0.464109031 0.464263263 0.477886177 0.479668459 0.486946092 0.493341409 0.498036184 0.511230340 0.542578590 0.565203606 0.566817008 0.583233038 0.585403018 0.604520101 0.639112168 0.644052213 0.665436592 0.671147090 0.674359615 0.681458525 0.691814778 0.699037963 0.704242029 0.706045891 0.714834719 0.728289080 0.737116781 0.738377947 0.750683647 0.771579384 0.775850140 0.802341186 0.816826094 0.819942916 0.820725677 0.831346673 0.840407181 0.843056408 0.846312935 0.849376252 0.858210647 0.864288710 0.867280192 0.867811588 0.872126732 0.873372758 0.878407166 0.889970208 0.890673777 0.893850167 0.910264419 0.917828276 0.923917970 0.930861238 0.932560894 0.936447899 0.946778827 0.958502887 0.963957690 0.969700102 0.976057312 0.989394201 0.999640419 1.013114758 1.034110091 1.042657274 1.049358490 1.055259353 1.075931004 1.084280096 1.088716192 1.110012712 1.110611134 1.116364759 1.122420230 1.123333237 1.134260562 1.143199473 1.161241320 1.168878552 1.172787527 1.173392264 1.200429713 1.204818258 1.216323114 1.247302353 1.294737366 1.295735475 1.313297886 1.318017189 1.326291597 1.327085128 1.330139746 1.334516874 1.341022732 1.346022915 1.362345478 1.378778178 1.380880893 1.381308063 1.384451185 1.466102249 1.557493876 1.671861596 1.855853491</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">85</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88806709" y3="-0.95524913" z3="-0.7003937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54189177" y3="-1.95935422" z3="-1.614112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02700609" y3="-1.00443898" z3="-1.47116617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73210896" y3="1.47300427" z3="-1.10695965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26437094" y3="0.31374265" z3="-0.51210729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61793767" y3="2.74830817" z3="-1.10622153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98002976" y3="2.7369789" z3="-0.86298753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3926782" y3="5.00842964" z3="-0.32087949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79305034" y3="3.86988878" z3="-0.80445646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.78139904" y3="5.88818744" z3="-0.09640363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01878469" y3="1.62780806" z3="-1.60409167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13262807" y3="0.37342424" z3="0.24849728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68695859" y3="0.39591732" z3="-0.5544623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61700413" y3="0.73526609" z3="0.41626972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60762982" y3="-0.84222682" z3="-1.41960959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10205792" y3="-2.48160853" z3="-1.267531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.25619304" y3="-5.48652665" z3="-6.17748269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.94446295" y3="-5.05625905" z3="-5.22145906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13303092" y3="-3.92549837" z3="-2.7937266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90112719" y3="-3.67666047" z3="-5.07086504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60861559" y3="-5.88748048" z3="-4.14973889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21814035" y3="-5.31586832" z3="-2.94543185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50400903" y3="-3.07914853" z3="-3.86362901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.16871434" y3="-3.00556655" z3="-5.89076104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66531396" y3="-6.9747524" z3="-4.24478728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9964371" y3="-5.95324185" z3="-2.08515655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68556837" y3="-3.38231029" z3="-1.56273143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32770808" y3="-3.87752524" z3="-0.84292124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65091631" y3="-4.88435456" z3="-1.12033747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40271863" y3="-3.57791089" z3="0.6042374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49588979" y3="-3.11108895" z3="3.36279023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73218601" y3="-4.61498076" z3="1.48617007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1401428" y3="-2.30296518" z3="1.11473369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18297152" y3="-2.07182358" z3="2.48539206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77004218" y3="-4.38364184" z3="2.8599254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9160516" y3="-5.62189257" z3="1.09943645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08963342" y3="-1.46351467" z3="0.45839886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03831602" y3="-1.06576558" z3="2.8513903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.99221169" y3="-5.20968225" z3="3.54122779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51823299" y3="-2.93384418" z3="4.44202123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45516655" y3="-1.74390224" z3="-3.83389932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52384017" y3="-1.33474339" z3="-2.92593332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31647927" y3="3.74284855" z3="-0.90731583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09971334" y3="-3.03511541" z3="-1.7488722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91356763" y3="-3.18267561" z3="-0.6209958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12480365" y3="-2.28290302" z3="0.28263947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8364109" y3="-0.70532361" z3="0.50603295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.53417791" y3="-0.15261706" z3="-1.13610151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54397702" y3="0.39758451" z3="1.24693569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21689347" y3="-1.03890836" z3="1.72466634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40719669" y3="-4.38575885" z3="-0.3668958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14724321" y3="-4.59420874" z3="0.82637196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.77154088" y3="0.24106774" z3="-1.81865055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27083657" y3="0.65317222" z3="-0.96645345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.05637126" y3="-0.97985862" z3="-1.65356795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62158055" y3="0.52454027" z3="0.64747084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23997699" y3="0.00918488" z3="2.23716476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9958196" y3="1.39563031" z3="1.39589453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68724742" y3="-0.08366821" z3="2.02435527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00663915" y3="-1.67793115" z3="1.29055856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.83386166" y3="-1.52858083" z3="2.63921489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07938067" y3="-4.00575625" z3="0.81402573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54937081" y3="-4.32608852" z3="1.71059495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38521132" y3="-5.66558282" z3="0.83869696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26867748" y3="-2.19295169" z3="-0.15815452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13922801" y3="-3.31306048" z3="-0.99236773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50680405" y3="-4.46852457" z3="-0.54966692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0027078" y3="-4.49783278" z3="0.74469377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14258077" y3="-3.41860948" z3="1.6122202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77142696" y3="-2.26810894" z3="1.15334989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49455236" y3="-3.26397289" z3="-2.0249148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37658412" y3="-5.32599197" z3="-1.210135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26320932" y3="-5.67779298" z3="1.19514898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73345168" y3="-3.47937622" z3="2.62174234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.85926874" y3="-1.40708524" z3="1.81682382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46805623" y3="4.00853868" z3="0.22228062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84351797" y3="3.81849212" z3="0.199459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43145708" y3="3.36736134" z3="-0.97512401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68570191" y3="3.12340396" z3="-2.1264351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30929318" y3="3.30324915" z3="-2.08140197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01618792" y3="4.32438495" z3="1.1477876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45814839" y3="3.99812832" z3="1.08054656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87554405" y3="3.12036143" z3="-1.00102433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.1889997" y3="2.78921482" z3="-3.03838605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29218085" y3="3.08486873" z3="-2.96481491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15740143" y3="-5.86214812" z3="2.38667877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77944906" y3="-6.40004023" z3="0.34256216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40996173" y3="2.96908071" z3="-2.08208201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4615437" y3="3.06993871" z3="0.05945941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54161395" y3="0.14685226" z3="-2.12102381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87124925" y3="1.39555796" z3="-1.97297171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68844015" y3="0.06422067" z3="-2.95840352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.13671032" y3="1.16189271" z3="-3.65024283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20065069" y3="-0.89832009" z3="-3.05227176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0156013" y3="1.08588046" z3="-4.29649025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34299472" y3="2.50604534" z3="-2.72759679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44454488" y3="2.39215229" z3="-3.54134454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81333169" y3="3.45871007" z3="-2.66257698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.78555157" y3="3.25846662" z3="-4.11521382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58911717" y3="3.90553768" z3="-0.29684499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78808226" y3="5.06251614" z3="-0.0675431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9591587" y3="3.95198353" z3="0.0870788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.51021502" y3="5.09632786" z3="0.61176065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57815086" y3="3.06077413" z3="-0.0323072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56540275" y3="5.10578286" z3="0.89934629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.39022196" y3="6.23619925" z3="0.46435049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72357036" y3="6.25956782" z3="0.79027862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76514933" y3="7.12086404" z3="0.62026585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17568941" y3="7.16637563" z3="1.20155281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.2917821" y3="-4.00910716" z3="-2.8938047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48445138" y3="-5.03575944" z3="-2.5470347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1482313" y3="-3.69964786" z3="-3.52189038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40014194" y3="-4.02129519" z3="-3.54068101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65423236" y3="-1.65566984" z3="-2.15143741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38226087" y3="-1.1919053" z3="-2.84094034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49854298" y3="-0.97881715" z3="-1.29512469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69838581" y3="-1.70822654" z3="-2.69519149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8881,-.9552,-.7004;6.5419,-1.9594,-1.6141;6.027,-1.0044,-1.4712;4.7321,1.473,-1.107;4.2644,.3137,-.5121;2.6179,2.7483,-1.1062;3.98,2.737,-.863;2.3927,5.0084,-.3209;1.7931,3.8699,-.8045;1.7814,5.8882,-.0964;2.0188,1.6278,-1.6041;3.1326,.3734,.2485;1.687,.3959,-.5545;.617,.7353,.4163;1.6076,-.8422,-1.4196;1.1021,-2.4816,-1.2675;2.2562,-5.4865,-6.1775;1.9445,-5.0563,-5.2215;1.133,-3.9255,-2.7937;1.9011,-3.6767,-5.0709;1.6086,-5.8875,-4.1497;1.2181,-5.3159,-2.9454;1.504,-3.0791,-3.8636;2.1687,-3.0056,-5.8908;1.6653,-6.9748,-4.2448;.9964,-5.9532,-2.0852;.6856,-3.3823,-1.5627;-.3277,-3.8775,-.8429;-.6509,-4.8844,-1.1203;-.4027,-3.5779,.6042;-.4959,-3.1111,3.3628;-.7322,-4.615,1.4862;-.1401,-2.303,1.1147;-.183,-2.0718,2.4854;-.77,-4.3836,2.8599;-.9161,-5.6219,1.0994;.0896,-1.4635,.4584;.0383,-1.0658,2.8514;-.9922,-5.2097,3.5412;-.5182,-2.9338,4.442;1.4552,-1.7439,-3.8339;1.5238,-1.3347,-2.9259;.3165,3.7428,-.9073;-2.0997,-3.0351,-1.7489;-2.9136,-3.1827,-.621;-3.1248,-2.2829,.2826;-3.8364,-.7053,.506;-4.5342,-.1526,-1.1361;-2.544,.3976,1.2469;-5.2169,-1.0389,1.7247;-3.4072,-4.3858,-.3669;-4.1472,-4.5942,.8264;-3.7715,.2411,-1.8187;-5.2708,.6532,-.9665;-5.0564,-.9799,-1.6536;-1.6216,.5245,.6475;-2.24,.0092,2.2372;-2.9958,1.3956,1.3959;-5.6872,-.0837,2.0244;-6.0066,-1.6779,1.2906;-4.8339,-1.5286,2.6392;-5.0794,-4.0058,.814;-3.5494,-4.3261,1.7106;-4.3852,-5.6656,.8387;4.2687,-2.193,-.1582;4.1392,-3.3131,-.9924;3.5068,-4.4685,-.5497;3.0027,-4.4978,.7447;3.1426,-3.4186,1.6122;3.7714,-2.2681,1.1533;4.4946,-3.264,-2.0249;3.3766,-5.326,-1.2101;2.2632,-5.6778,1.1951;2.7335,-3.4794,2.6217;3.8593,-1.4071,1.8168;-.4681,4.0085,.2223;-1.8435,3.8185,.1995;-2.4315,3.3674,-.9751;-1.6857,3.1234,-2.1264;-.3093,3.3032,-2.0814;.0162,4.3244,1.1478;-2.4581,3.9981,1.0805;-3.8755,3.1204,-1.001;-2.189,2.7892,-3.0384;.2922,3.0849,-2.9648;2.1574,-5.8621,2.3867;1.7794,-6.4,.3426;-4.41,2.9691,-2.0821;-4.4615,3.0699,.0595;6.5416,.1469,-2.121;5.8712,1.3956,-1.973;7.6884,.0642,-2.9584;8.1367,1.1619,-3.6502;8.2007,-.8983,-3.0523;9.0156,1.0859,-4.2965;6.343,2.506,-2.7276;7.4445,2.3922,-3.5413;5.8133,3.4587,-2.6626;7.7856,3.2585,-4.1152;4.5891,3.9055,-.2968;3.7881,5.0625,-.0675;5.9592,3.952,.0871;6.5102,5.0963,.6118;6.5782,3.0608,-.0323;7.5654,5.1058,.8993;4.3902,6.2362,.4644;5.7236,6.2596,.7903;3.7651,7.1209,.6203;6.1757,7.1664,1.2016;-2.2918,-4.0091,-2.8938;-2.4845,-5.0358,-2.547;-3.1482,-3.6996,-3.5219;-1.4001,-4.0213,-3.5407;-1.6542,-1.6557,-2.1514;-2.3823,-1.1919,-2.8409;-1.4985,-.9788,-1.2951;-.6984,-1.7082,-2.6952;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662658365985</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.015751214651 0.001281619134 0.024953498140 0.005337823473</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.047470154 -0.006390412 0.000170299 0.000224757 0.000325604 0.000340545 0.000369434 0.000424134 0.000522428 0.000645139 0.000737691 0.000812724 0.000945240 0.001081069 0.001235964 0.001247146 0.001268388 0.001336837 0.001471394 0.001511910 0.001752351 0.001904246 0.002182881 0.002299390 0.002711901 0.002981079 0.003401119 0.003586474 0.003659672 0.004348194 0.004396757 0.004669000 0.004956728 0.005172328 0.005769278 0.005815127 0.006389208 0.006595973 0.006829296 0.007421966 0.007785078 0.008366480 0.008649468 0.009156005 0.009354082 0.010135486 0.010367830 0.011492411 0.012325773 0.012892847 0.013005809 0.013965744 0.014379126 0.014631280 0.014976456 0.015452864 0.015659691 0.016106025 0.016406224 0.017246444 0.017531331 0.018023942 0.019028202 0.019890443 0.020429049 0.021684067 0.022431227 0.022595013 0.023126386 0.023530968 0.024626331 0.025981279 0.026386050 0.026682992 0.027448555 0.027791672 0.029880221 0.030427644 0.031267505 0.032353735 0.032689048 0.033301579 0.037014589 0.038507552 0.040068258 0.040575945 0.041459615 0.043686085 0.044133064 0.045293259 0.046234570 0.049669417 0.050618277 0.050838949 0.051423448 0.051598343 0.051815768 0.052282162 0.052390771 0.052576297 0.053877259 0.054819703 0.056493487 0.056852625 0.057061510 0.057406978 0.057736997 0.058594305 0.059222403 0.060389276 0.060636352 0.061126068 0.061575927 0.062397851 0.063758353 0.064287113 0.064511573 0.065244247 0.066099370 0.067886436 0.068055016 0.068860077 0.071416504 0.071960508 0.072680357 0.076506346 0.078287530 0.080546586 0.080871997 0.082454639 0.086748818 0.087868760 0.089501377 0.090841447 0.092850403 0.093650843 0.094352877 0.095281808 0.095715763 0.096608421 0.097403798 0.098072986 0.099689454 0.100947449 0.101295329 0.102772778 0.102874951 0.103957732 0.106917450 0.107668108 0.108951967 0.110463435 0.111054037 0.111712285 0.112729208 0.114316530 0.115701608 0.116454186 0.117340980 0.118166598 0.122747897 0.123512956 0.125698730 0.127106124 0.127837531 0.129999956 0.132308707 0.133629433 0.135694722 0.137019263 0.142226059 0.144128724 0.144543411 0.146045539 0.150066126 0.152744704 0.153510345 0.159191071 0.165643061 0.170645165 0.174545966 0.176552486 0.180671326 0.183265237 0.185831134 0.187655117 0.188742585 0.193558621 0.197127118 0.201846726 0.205073569 0.205468598 0.206719982 0.207162197 0.208748446 0.209097587 0.211409426 0.213162864 0.216540332 0.221074406 0.224899888 0.231538252 0.232725488 0.233950062 0.235322551 0.236985696 0.244895099 0.249391698 0.254696464 0.255393618 0.256817368 0.258936100 0.271379482 0.278101998 0.290463765 0.296706446 0.298510779 0.299595375 0.304404300 0.306349039 0.307547585 0.317660015 0.320707295 0.323266582 0.327608223 0.329211298 0.346121000 0.350660458 0.354777942 0.355680459 0.359290472 0.363872736 0.382199756 0.398032861 0.405839756 0.420125485 0.429325470 0.430431632 0.438438829 0.445395937 0.464244024 0.464299954 0.477886393 0.480286445 0.488111608 0.493902153 0.498036284 0.511261854 0.542588638 0.565205451 0.566831619 0.583243044 0.585439086 0.604532671 0.639247384 0.644080213 0.665438072 0.671334606 0.674437281 0.681462190 0.691815776 0.699046632 0.704242066 0.707084206 0.714834414 0.728482071 0.737129852 0.738389257 0.750686140 0.771579403 0.775850165 0.802407790 0.816854950 0.819972299 0.820734387 0.831380757 0.840408051 0.843092077 0.846317650 0.849422451 0.858210818 0.864320728 0.867313029 0.868148283 0.872145185 0.873357109 0.879004634 0.890035927 0.890705148 0.893867974 0.911968424 0.917828938 0.923921925 0.930869166 0.934127891 0.936527601 0.946809058 0.958503415 0.963999785 0.969711563 0.976107190 0.989453074 0.999652281 1.013124327 1.034184085 1.042731910 1.049368947 1.055259497 1.075931318 1.084367629 1.088792737 1.110019508 1.110618098 1.116364766 1.122422044 1.123335910 1.134261767 1.143207372 1.161241507 1.168904079 1.172799342 1.173428548 1.200432517 1.204917938 1.216324887 1.247302389 1.294761369 1.295735433 1.313297886 1.318012510 1.326292177 1.327093547 1.330139811 1.334517046 1.341025129 1.346023608 1.362347301 1.378778572 1.380886026 1.381326928 1.384899813 1.466173303 1.557493851 1.671861661 1.865145978</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">86</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88879056" y3="-0.95524817" z3="-0.70130249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54110122" y3="-1.95885975" z3="-1.61825762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02607439" y3="-1.00416537" z3="-1.47446164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73093908" y3="1.47273477" z3="-1.10847945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26495355" y3="0.3135247" z3="-0.51229543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61622414" y3="2.74647251" z3="-1.10532744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9785806" y3="2.73615837" z3="-0.86412026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.39137651" y3="5.00751206" z3="-0.32250927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79154364" y3="3.86802922" z3="-0.80368082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.78017037" y3="5.88725635" z3="-0.09856076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01591107" y3="1.62540317" z3="-1.60079342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13459992" y3="0.37301101" z3="0.25031891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6873791" y3="0.39412415" z3="-0.54969244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61928291" y3="0.73252015" z3="0.42329495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60685078" y3="-0.84470486" z3="-1.41416274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10441308" y3="-2.48412682" z3="-1.26398166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.26980889" y3="-5.48751274" z3="-6.17181855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.95509018" y3="-5.05750514" z3="-5.21665142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1371167" y3="-3.92762362" z3="-2.79113334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.9121005" y3="-3.67803462" z3="-5.0655489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.61519815" y3="-5.88915461" z3="-4.14649862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22132097" y3="-5.31795867" z3="-2.9432222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51177483" y3="-3.08072366" z3="-3.85921174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.18293648" y3="-3.00670956" z3="-5.88418632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.67158948" y3="-6.97639463" z3="-4.24190229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99691881" y3="-5.95571194" z3="-2.08396698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68794755" y3="-3.38513935" z3="-1.56014769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32090241" y3="-3.88371445" z3="-0.84026469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65065769" y3="-4.88613695" z3="-1.12244027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.4027912" y3="-3.58317065" z3="0.60538747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5051937" y3="-3.1198859" z3="3.36356322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73947913" y3="-4.62022128" z3="1.48412354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13837114" y3="-2.30970049" z3="1.11846656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18576144" y3="-2.08046734" z3="2.48918325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.78174946" y3="-4.39056723" z3="2.85777067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92639203" y3="-5.62456747" z3="1.09439541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09472045" y3="-1.46943634" z3="0.46327821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0363169" y3="-1.07524213" z3="2.85754582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.01004579" y3="-5.21618522" z3="3.53629994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.53131536" y3="-2.94363196" z3="4.44284883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46440758" y3="-1.74565111" z3="-3.82924645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52899616" y3="-1.33639674" z3="-2.92070568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3147182" y3="3.74083072" z3="-0.90448543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10388911" y3="-3.02991203" z3="-1.75154709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9135202" y3="-3.17948137" z3="-0.62403295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12140692" y3="-2.2813584" z3="0.28247936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83328759" y3="-0.70346073" z3="0.50539097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.52479959" y3="-0.15005676" z3="-1.1387967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54046637" y3="0.39476482" z3="1.2568308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22417144" y3="-1.03611614" z3="1.71719746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40986262" y3="-4.38304121" z3="-0.3713015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15288462" y3="-4.5904159" z3="0.8200666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.74658738" y3="0.25907605" z3="-1.81253105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.26333623" y3="0.65353525" z3="-0.9669635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.03822801" y3="-0.97677091" z3="-1.66224946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61846346" y3="0.51970268" z3="0.66059207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23858094" y3="0.00994585" z3="2.24288027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99140886" y3="1.39495661" z3="1.40176386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69836028" y3="-0.08272161" z3="2.01532979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00934366" y3="-1.67601957" z3="1.27910927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.84434589" y3="-1.52245722" z3="2.63286643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08365598" y3="-4.00020271" z3="0.80675072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5567633" y3="-4.32382222" z3="1.70633071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39322152" y3="-5.66184767" z3="0.83200254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27061793" y3="-2.19281071" z3="-0.15754593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14067696" y3="-3.31357393" z3="-0.99074794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50792862" y3="-4.46842789" z3="-0.54687503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00375878" y3="-4.49636589" z3="0.7474866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14470026" y3="-3.41664" z3="1.61422692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77416797" y3="-2.26691773" z3="1.15433305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49560506" y3="-3.26549563" z3="-2.0234753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37719411" y3="-5.32638203" z3="-1.20661879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26250469" y3="-5.67493222" z3="1.19861316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73574055" y3="-3.47639394" z3="2.6238594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86270238" y3="-1.40545264" z3="1.81712817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46688416" y3="4.00489681" z3="0.22895515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84339405" y3="3.81873537" z3="0.2069679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43723971" y3="3.37732214" z3="-0.9740392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69330614" y3="3.13160009" z3="-2.12575352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3150919" y3="3.30531742" z3="-2.08055175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.02200482" y3="4.31627916" z3="1.15704647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45400005" y3="3.99438533" z3="1.09536176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88093175" y3="3.13076466" z3="-0.99708371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19198275" y3="2.7910966" z3="-3.03049242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28392913" y3="3.0853274" z3="-2.9670472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15445122" y3="-5.85717941" z3="2.39017691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77944514" y3="-6.39795449" z3="0.34627478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41183444" y3="2.98156301" z3="-2.07338772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46165952" y3="3.05805067" z3="0.07771036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5387742" y3="0.14713716" z3="-2.12575877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86828485" y3="1.39562682" z3="-1.97673691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68378497" y3="0.06461122" z3="-2.9655595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.13019843" y3="1.16220129" z3="-3.65870098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19605503" y3="-0.89780734" z3="-3.06018017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.00775204" y3="1.08627254" z3="-4.30672638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33796066" y3="2.50603522" z3="-2.73278845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.43783618" y3="2.39224095" z3="-3.54878534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80809605" y3="3.45853055" z3="-2.66713786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.77736019" y3="3.2584641" z3="-4.12367007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58798768" y3="3.90557075" z3="-0.30007172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78704617" y3="5.06255693" z3="-0.0711533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95837426" y3="3.95298631" z3="0.08202056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50983914" y3="5.0981247" z3="0.60439844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57739975" y3="3.06190936" z3="-0.03691375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56531413" y3="5.10830513" z3="0.89059874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38954398" y3="6.23715467" z3="0.45827877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72321675" y3="6.26137658" z3="0.78235409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76460908" y3="7.12196366" z3="0.61382321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17571155" y3="7.16887222" z3="1.1915994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29043662" y3="-4.00575113" z3="-2.89639817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48550571" y3="-5.03222791" z3="-2.54991159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1445642" y3="-3.69520674" z3="-3.52781399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.39666339" y3="-4.01941322" z3="-3.5405848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6502294" y3="-1.65308315" z3="-2.15133637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3746557" y3="-1.18554537" z3="-2.84235711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49351482" y3="-0.98097189" z3="-1.29354386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69192459" y3="-1.7094043" z3="-2.6930949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8888,-.9552,-.7013;6.5411,-1.9589,-1.6183;6.0261,-1.0042,-1.4745;4.7309,1.4727,-1.1085;4.265,.3135,-.5123;2.6162,2.7465,-1.1053;3.9786,2.7362,-.8641;2.3914,5.0075,-.3225;1.7915,3.868,-.8037;1.7802,5.8873,-.0986;2.0159,1.6254,-1.6008;3.1346,.373,.2503;1.6874,.3941,-.5497;.6193,.7325,.4233;1.6069,-.8447,-1.4142;1.1044,-2.4841,-1.264;2.2698,-5.4875,-6.1718;1.9551,-5.0575,-5.2167;1.1371,-3.9276,-2.7911;1.9121,-3.678,-5.0655;1.6152,-5.8892,-4.1465;1.2213,-5.318,-2.9432;1.5118,-3.0807,-3.8592;2.1829,-3.0067,-5.8842;1.6716,-6.9764,-4.2419;.9969,-5.9557,-2.084;.6879,-3.3851,-1.5601;-.3209,-3.8837,-.8403;-.6507,-4.8861,-1.1224;-.4028,-3.5832,.6054;-.5052,-3.1199,3.3636;-.7395,-4.6202,1.4841;-.1384,-2.3097,1.1185;-.1858,-2.0805,2.4892;-.7817,-4.3906,2.8578;-.9264,-5.6246,1.0944;.0947,-1.4694,.4633;.0363,-1.0752,2.8575;-1.01,-5.2162,3.5363;-.5313,-2.9436,4.4428;1.4644,-1.7457,-3.8292;1.529,-1.3364,-2.9207;.3147,3.7408,-.9045;-2.1039,-3.0299,-1.7515;-2.9135,-3.1795,-.624;-3.1214,-2.2814,.2825;-3.8333,-.7035,.5054;-4.5248,-.1501,-1.1388;-2.5405,.3948,1.2568;-5.2242,-1.0361,1.7172;-3.4099,-4.383,-.3713;-4.1529,-4.5904,.8201;-3.7466,.2591,-1.8125;-5.2633,.6535,-.967;-5.0382,-.9768,-1.6622;-1.6185,.5197,.6606;-2.2386,.0099,2.2429;-2.9914,1.395,1.4018;-5.6984,-.0827,2.0153;-6.0093,-1.676,1.2791;-4.8443,-1.5225,2.6329;-5.0837,-4.0002,.8068;-3.5568,-4.3238,1.7063;-4.3932,-5.6618,.832;4.2706,-2.1928,-.1575;4.1407,-3.3136,-.9907;3.5079,-4.4684,-.5469;3.0038,-4.4964,.7475;3.1447,-3.4166,1.6142;3.7742,-2.2669,1.1543;4.4956,-3.2655,-2.0235;3.3772,-5.3264,-1.2066;2.2625,-5.6749,1.1986;2.7357,-3.4764,2.6239;3.8627,-1.4055,1.8171;-.4669,4.0049,.229;-1.8434,3.8187,.207;-2.4372,3.3773,-.974;-1.6933,3.1316,-2.1258;-.3151,3.3053,-2.0806;.022,4.3163,1.157;-2.454,3.9944,1.0954;-3.8809,3.1308,-.9971;-2.192,2.7911,-3.0305;.2839,3.0853,-2.967;2.1545,-5.8572,2.3902;1.7794,-6.398,.3463;-4.4118,2.9816,-2.0734;-4.4617,3.0581,.0777;6.5388,.1471,-2.1258;5.8683,1.3956,-1.9767;7.6838,.0646,-2.9656;8.1302,1.1622,-3.6587;8.1961,-.8978,-3.0602;9.0078,1.0863,-4.3067;6.338,2.506,-2.7328;7.4378,2.3922,-3.5488;5.8081,3.4585,-2.6671;7.7774,3.2585,-4.1237;4.588,3.9056,-.3001;3.787,5.0626,-.0712;5.9584,3.953,.082;6.5098,5.0981,.6044;6.5774,3.0619,-.0369;7.5653,5.1083,.8906;4.3895,6.2372,.4583;5.7232,6.2614,.7824;3.7646,7.122,.6138;6.1757,7.1689,1.1916;-2.2904,-4.0058,-2.8964;-2.4855,-5.0322,-2.5499;-3.1446,-3.6952,-3.5278;-1.3967,-4.0194,-3.5406;-1.6502,-1.6531,-2.1513;-2.3747,-1.1855,-2.8424;-1.4935,-.981,-1.2935;-.6919,-1.7094,-2.6931;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662579110867</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.019239738432 0.001697964385 0.018911615564 0.005337946680</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.049139539 -0.009180751 0.000171618 0.000253187 0.000339459 0.000343988 0.000369651 0.000428297 0.000522052 0.000645589 0.000745279 0.000812690 0.000945656 0.001081052 0.001238894 0.001246775 0.001268350 0.001337400 0.001471135 0.001513552 0.001753092 0.001907317 0.002190764 0.002435019 0.002786476 0.003004401 0.003464776 0.003586337 0.003660094 0.004351251 0.004456413 0.004669160 0.004956371 0.005204756 0.005796016 0.005821555 0.006443284 0.006725167 0.006833578 0.007429395 0.007785972 0.008366039 0.008705407 0.009175450 0.009356638 0.010135530 0.010382185 0.011494498 0.012386577 0.012908824 0.013016963 0.013986681 0.014384311 0.014631234 0.015011580 0.015456232 0.015660658 0.016161217 0.016428327 0.017254365 0.017544910 0.018023958 0.019049023 0.019908675 0.020429723 0.021705700 0.022432426 0.022619215 0.023161481 0.023577067 0.024653348 0.025987156 0.026387144 0.026685711 0.027456607 0.027792687 0.029883064 0.030427540 0.031294214 0.032364938 0.032698420 0.033516430 0.037113960 0.038523694 0.040126703 0.040576278 0.041737244 0.043894792 0.044134560 0.045292922 0.046238692 0.049669415 0.050615547 0.050893840 0.051432409 0.051604742 0.051816070 0.052282289 0.052391584 0.052577532 0.053887388 0.054837662 0.056493465 0.056854791 0.057070297 0.057475899 0.057736983 0.058594313 0.059222952 0.060389542 0.060641337 0.061165477 0.061575687 0.062422707 0.063841805 0.064313636 0.064535929 0.065296260 0.066100997 0.067962963 0.068522032 0.070906795 0.071955013 0.072557767 0.072846608 0.076513369 0.078368597 0.080534982 0.080892997 0.082490017 0.086764664 0.087960176 0.089504543 0.090845191 0.092851357 0.093794918 0.094526594 0.095286963 0.095730458 0.096621158 0.097438495 0.098168877 0.099687719 0.101022668 0.101304232 0.102792411 0.102876414 0.103995802 0.106987036 0.107816567 0.108977569 0.110469227 0.111164504 0.111713303 0.112739310 0.114315802 0.115745895 0.116464489 0.117347257 0.118435588 0.122857962 0.123621722 0.125737206 0.127120975 0.127841242 0.130023918 0.132312110 0.133649897 0.135695591 0.137036963 0.142230893 0.144377942 0.144564551 0.146047583 0.150285896 0.152744785 0.153592497 0.159381776 0.165646663 0.170651753 0.174550501 0.176595754 0.180671338 0.183270414 0.185926883 0.187664538 0.188743283 0.194819763 0.197284824 0.201846766 0.205116515 0.205469127 0.206721877 0.207162354 0.209070498 0.210313606 0.211409034 0.213170988 0.216557860 0.221085188 0.224900421 0.231538949 0.232726942 0.233957188 0.235338555 0.237513101 0.244912294 0.249391421 0.254700383 0.255393962 0.256824392 0.258938709 0.271380022 0.278133447 0.290517737 0.296741258 0.298529562 0.299667234 0.304441837 0.306365288 0.307548049 0.317692794 0.320740630 0.323416931 0.327609533 0.329235533 0.346218251 0.350706400 0.354808670 0.355700040 0.359290366 0.363874874 0.382357547 0.398035511 0.405914244 0.420848053 0.429561444 0.430482810 0.443966715 0.445512910 0.464255650 0.464709520 0.477886678 0.481457556 0.489215603 0.495485005 0.498036415 0.511579090 0.542646251 0.565232097 0.566841178 0.583275393 0.585870290 0.604532784 0.639270100 0.644155197 0.665441964 0.671568516 0.674444665 0.681462990 0.691818481 0.699046795 0.704242156 0.708393120 0.714860661 0.728647935 0.737155658 0.738395828 0.750688321 0.771579488 0.775851627 0.802531961 0.816910943 0.820023604 0.820744602 0.831426274 0.840408168 0.843124468 0.846329395 0.849491332 0.858214507 0.864351730 0.867315701 0.868214274 0.872181146 0.873861440 0.879265639 0.890048507 0.890704082 0.893869379 0.912731046 0.917859386 0.923922009 0.930875586 0.936023687 0.938558851 0.946807999 0.958514118 0.964790910 0.969784804 0.976350492 0.989683715 0.999691587 1.013150538 1.034350302 1.042925308 1.049374190 1.055259624 1.075939842 1.084506482 1.088931724 1.110025375 1.110626076 1.116365392 1.122423428 1.123338261 1.134261775 1.143207085 1.161242554 1.168932301 1.172820208 1.173470702 1.200435328 1.205021751 1.216350489 1.247303331 1.294782519 1.295735423 1.313349725 1.318242859 1.326292442 1.327093939 1.330139879 1.334517300 1.341029664 1.346027755 1.362347559 1.378780410 1.380891392 1.381345742 1.385599016 1.468828549 1.557493840 1.671861987 1.877468360</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">87</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88904237" y3="-0.95528771" z3="-0.70272615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53955529" y3="-1.95855326" z3="-1.62339071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02451926" y3="-1.00400567" z3="-1.47861501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72912226" y3="1.47241913" z3="-1.11092895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26513092" y3="0.3133928" z3="-0.51289429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61335848" y3="2.74551328" z3="-1.10374847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97653741" y3="2.73564159" z3="-0.86562731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38966044" y3="5.00729389" z3="-0.32172852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78896219" y3="3.86745784" z3="-0.80077423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77838939" y3="5.88700854" z3="-0.09727835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01237715" y3="1.62405398" z3="-1.59703368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13657924" y3="0.37330289" z3="0.25241466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68759481" y3="0.39254552" z3="-0.54455531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6212362" y3="0.73041768" z3="0.43059443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60684717" y3="-0.84619266" z3="-1.4083798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10506395" y3="-2.48733205" z3="-1.26090199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.28531621" y3="-5.48947" z3="-6.16561836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.96742504" y3="-5.05970988" z3="-5.21139462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14171151" y3="-3.93004023" z3="-2.78763686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.92497377" y3="-3.68019118" z3="-5.0596847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.6228774" y3="-5.89144006" z3="-4.14283464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22541469" y3="-5.32037729" z3="-2.94056315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.52057516" y3="-3.08329653" z3="-3.85456565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.19912657" y3="-3.00864057" z3="-5.87706048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.67871424" y3="-6.97871178" z3="-4.23843633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99759824" y3="-5.95823498" z3="-2.08222626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68990239" y3="-3.38785474" z3="-1.55810591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32977897" y3="-3.88019129" z3="-0.84398572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65124534" y3="-4.88764497" z3="-1.12368203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40677119" y3="-3.58685312" z3="0.60462612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.51476836" y3="-3.12876188" z3="3.36429343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74771227" y3="-4.62486696" z3="1.48115928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13897146" y3="-2.31539371" z3="1.1211601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18922473" y3="-2.08873378" z3="2.49238164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.79353728" y3="-4.39780651" z3="2.85530762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93664653" y3="-5.62853154" z3="1.08932812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09938934" y3="-1.47497858" z3="0.46863066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03498672" y3="-1.08500763" z3="2.86334389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.02699792" y3="-5.22403406" z3="3.53202223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.54423039" y3="-2.95426445" z3="4.44379255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47378004" y3="-1.74787476" z3="-3.82412003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53496316" y3="-1.33917963" z3="-2.91544956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31187431" y3="3.74123969" z3="-0.89902497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09118163" y3="-3.03454816" z3="-1.74954701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9127876" y3="-3.17820927" z3="-0.62462134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12440471" y3="-2.27872887" z3="0.27866532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83010469" y3="-0.69716982" z3="0.50608948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.5104814" y3="-0.13953939" z3="-1.14014549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.54079189" y3="0.3954039" z3="1.25652193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22220758" y3="-1.03183104" z3="1.70818451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41323283" y3="-4.37835418" z3="-0.37622405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1586691" y3="-4.58659145" z3="0.81443313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.74149871" y3="0.26232775" z3="-1.80997503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.25810308" y3="0.65996847" z3="-0.97336948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.0193164" y3="-0.96682273" z3="-1.66574378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61414987" y3="0.51545383" z3="0.66486992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2481147" y3="0.00496288" z3="2.25080539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98966129" y3="1.39313408" z3="1.40489802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69422678" y3="-0.0773695" z3="2.00506867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01034526" y3="-1.66716515" z3="1.26488564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.84892195" y3="-1.5259268" z3="2.62255735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08820936" y3="-3.99463779" z3="0.79918116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56243416" y3="-4.31995828" z3="1.70140643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40021932" y3="-5.65811752" z3="0.82608413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27229861" y3="-2.19280981" z3="-0.15723603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14226448" y3="-3.3145731" z3="-0.98919151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50938864" y3="-4.46892506" z3="-0.54403072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00509491" y3="-4.49525965" z3="0.75027886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14684092" y3="-3.4147747" z3="1.61606618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77663359" y3="-2.26567704" z3="1.15503417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49668479" y3="-3.26761184" z3="-2.02216294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37821139" y3="-5.32748964" z3="-1.20295163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26219798" y3="-5.67258401" z3="1.20229625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73818635" y3="-3.47349496" z3="2.62586704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8656499" y3="-1.40355802" z3="1.81697873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4679481" y3="4.00451535" z3="0.23438277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84461145" y3="3.82007796" z3="0.21435588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.436952" y3="3.37455657" z3="-0.9596147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69496606" y3="3.13017272" z3="-2.11256719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31826078" y3="3.30662186" z3="-2.0732744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.02152474" y3="4.31264347" z3="1.1619778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45426698" y3="3.99589722" z3="1.10079636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88099001" y3="3.12991736" z3="-0.98030442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19940916" y3="2.79613791" z3="-3.0220718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27851878" y3="3.08922639" z3="-2.96164389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15176921" y3="-5.85237485" z3="2.39415019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78035453" y3="-6.39710152" z3="0.35062106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41788509" y3="2.98728987" z3="-2.05925467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46473504" y3="3.07427127" z3="0.07820191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53523161" y3="0.14724547" z3="-2.13162805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86462174" y3="1.3955153" z3="-1.98153334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67816839" y3="0.06490994" z3="-2.97429724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.12246308" y3="1.16248219" z3="-3.66887827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19046822" y3="-0.8973886" z3="-3.07002517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.99837328" y3="1.0866606" z3="-4.31919523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33211117" y3="2.50595476" z3="-2.73882777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.43003736" y3="2.39236363" z3="-3.55748797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80205175" y3="3.45827597" z3="-2.67199154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.76783016" y3="3.25859563" z3="-4.13338891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58681863" y3="3.9055443" z3="-0.30332943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78601013" y3="5.06264247" z3="-0.07346544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95802079" y3="3.95346427" z3="0.07629758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.51015358" y3="5.09922661" z3="0.59679835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57704336" y3="3.06228353" z3="-0.04296962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56622383" y3="5.1098678" z3="0.88110296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38911629" y3="6.23782143" z3="0.45393768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72355612" y3="6.262591" z3="0.77533789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76397198" y3="7.12250504" z3="0.61002521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17652943" y3="7.17059581" z3="1.18300472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28637784" y3="-4.00422277" z3="-2.89749941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48613863" y3="-5.03036873" z3="-2.55361251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.13854788" y3="-3.68874324" z3="-3.52825065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.39243666" y3="-4.0197709" z3="-3.54128007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64189759" y3="-1.65451123" z3="-2.15077771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3674368" y3="-1.18555176" z3="-2.83996772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48276965" y3="-0.98072357" z3="-1.29289873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68578533" y3="-1.71079852" z3="-2.69404978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.889,-.9553,-.7027;6.5396,-1.9586,-1.6234;6.0245,-1.004,-1.4786;4.7291,1.4724,-1.1109;4.2651,.3134,-.5129;2.6134,2.7455,-1.1037;3.9765,2.7356,-.8656;2.3897,5.0073,-.3217;1.789,3.8675,-.8008;1.7784,5.887,-.0973;2.0124,1.6241,-1.597;3.1366,.3733,.2524;1.6876,.3925,-.5446;.6212,.7304,.4306;1.6068,-.8462,-1.4084;1.1051,-2.4873,-1.2609;2.2853,-5.4895,-6.1656;1.9674,-5.0597,-5.2114;1.1417,-3.93,-2.7876;1.925,-3.6802,-5.0597;1.6229,-5.8914,-4.1428;1.2254,-5.3204,-2.9406;1.5206,-3.0833,-3.8546;2.1991,-3.0086,-5.8771;1.6787,-6.9787,-4.2384;.9976,-5.9582,-2.0822;.6899,-3.3879,-1.5581;-.3298,-3.8802,-.844;-.6512,-4.8876,-1.1237;-.4068,-3.5869,.6046;-.5148,-3.1288,3.3643;-.7477,-4.6249,1.4812;-.139,-2.3154,1.1212;-.1892,-2.0887,2.4924;-.7935,-4.3978,2.8553;-.9366,-5.6285,1.0893;.0994,-1.475,.4686;.035,-1.085,2.8633;-1.027,-5.224,3.532;-.5442,-2.9543,4.4438;1.4738,-1.7479,-3.8241;1.535,-1.3392,-2.9154;.3119,3.7412,-.899;-2.0912,-3.0345,-1.7495;-2.9128,-3.1782,-.6246;-3.1244,-2.2787,.2787;-3.8301,-.6972,.5061;-4.5105,-.1395,-1.1401;-2.5408,.3954,1.2565;-5.2222,-1.0318,1.7082;-3.4132,-4.3784,-.3762;-4.1587,-4.5866,.8144;-3.7415,.2623,-1.81;-5.2581,.66,-.9734;-5.0193,-.9668,-1.6657;-1.6141,.5155,.6649;-2.2481,.005,2.2508;-2.9897,1.3931,1.4049;-5.6942,-.0774,2.0051;-6.0103,-1.6672,1.2649;-4.8489,-1.5259,2.6226;-5.0882,-3.9946,.7992;-3.5624,-4.32,1.7014;-4.4002,-5.6581,.8261;4.2723,-2.1928,-.1572;4.1423,-3.3146,-.9892;3.5094,-4.4689,-.544;3.0051,-4.4953,.7503;3.1468,-3.4148,1.6161;3.7766,-2.2657,1.155;4.4967,-3.2676,-2.0222;3.3782,-5.3275,-1.203;2.2622,-5.6726,1.2023;2.7382,-3.4735,2.6259;3.8656,-1.4036,1.817;-.4679,4.0045,.2344;-1.8446,3.8201,.2144;-2.437,3.3746,-.9596;-1.695,3.1302,-2.1126;-.3183,3.3066,-2.0733;.0215,4.3126,1.162;-2.4543,3.9959,1.1008;-3.881,3.1299,-.9803;-2.1994,2.7961,-3.0221;.2785,3.0892,-2.9616;2.1518,-5.8524,2.3942;1.7804,-6.3971,.3506;-4.4179,2.9873,-2.0593;-4.4647,3.0743,.0782;6.5352,.1472,-2.1316;5.8646,1.3955,-1.9815;7.6782,.0649,-2.9743;8.1225,1.1625,-3.6689;8.1905,-.8974,-3.07;8.9984,1.0867,-4.3192;6.3321,2.506,-2.7388;7.43,2.3924,-3.5575;5.8021,3.4583,-2.672;7.7678,3.2586,-4.1334;4.5868,3.9055,-.3033;3.786,5.0626,-.0735;5.958,3.9535,.0763;6.5102,5.0992,.5968;6.577,3.0623,-.043;7.5662,5.1099,.8811;4.3891,6.2378,.4539;5.7236,6.2626,.7753;3.764,7.1225,.61;6.1765,7.1706,1.183;-2.2864,-4.0042,-2.8975;-2.4861,-5.0304,-2.5536;-3.1385,-3.6887,-3.5283;-1.3924,-4.0198,-3.5413;-1.6419,-1.6545,-2.1508;-2.3674,-1.1856,-2.84;-1.4828,-.9807,-1.2929;-.6858,-1.7108,-2.694;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662601788143</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.017842312256 0.001610372780 0.019593353207 0.005337899580</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.051656280 -0.006739725 0.000176582 0.000246099 0.000338139 0.000342126 0.000369197 0.000427979 0.000528420 0.000645647 0.000745757 0.000813773 0.000947692 0.001083676 0.001238015 0.001246851 0.001270049 0.001357325 0.001485907 0.001536848 0.001755380 0.001909890 0.002198972 0.002438837 0.002807047 0.003008196 0.003463114 0.003610741 0.003663537 0.004353687 0.004461918 0.004672263 0.004956852 0.005204628 0.005799217 0.005820083 0.006453281 0.006705571 0.006832741 0.007433840 0.007787081 0.008372590 0.008701841 0.009177297 0.009356339 0.010135668 0.010381716 0.011501457 0.012386539 0.012919257 0.013017479 0.014004353 0.014386821 0.014645352 0.015043159 0.015455577 0.015661320 0.016245604 0.016519664 0.017257397 0.017558940 0.018024063 0.019075447 0.019909912 0.020435542 0.021699712 0.022441358 0.022620286 0.023158636 0.023583460 0.024656088 0.025987143 0.026396679 0.026690274 0.027514183 0.027795045 0.029882891 0.030427670 0.031305290 0.032363854 0.032699708 0.033504057 0.037183801 0.038521578 0.040121691 0.040599331 0.041717234 0.044095065 0.044408013 0.045296399 0.046242942 0.049669432 0.050615257 0.050887864 0.051432608 0.051605363 0.051816233 0.052282297 0.052391504 0.052577455 0.053886425 0.054836878 0.056493435 0.056854596 0.057071900 0.057469256 0.057737254 0.058595161 0.059222925 0.060446464 0.060645997 0.061165850 0.061575626 0.062441505 0.063902119 0.064349776 0.064568854 0.065293233 0.066101961 0.067972567 0.068547441 0.071152518 0.071966173 0.072674195 0.075957748 0.076596496 0.078542850 0.080695595 0.080924652 0.082484894 0.086815721 0.087954563 0.089504066 0.090864335 0.092852041 0.093811428 0.094799793 0.095289081 0.095739795 0.096623515 0.097444874 0.098174823 0.099698850 0.101081945 0.101320946 0.102806269 0.102886336 0.104039827 0.107020444 0.108156270 0.108982029 0.110467767 0.111336395 0.111714027 0.112738477 0.114327522 0.115881296 0.116473302 0.117348183 0.118683229 0.122933871 0.123690607 0.125868118 0.127134057 0.127858483 0.130024486 0.132324576 0.133647769 0.135701427 0.137039877 0.142236256 0.144437305 0.144612756 0.146048433 0.150279240 0.152755371 0.153771416 0.159427665 0.165685458 0.170660585 0.174556118 0.176635383 0.180671922 0.183271743 0.185975498 0.187668659 0.188747415 0.195755310 0.197700760 0.201847944 0.205140298 0.205472155 0.206721555 0.207162698 0.209073595 0.211408709 0.212114281 0.213198941 0.216581919 0.221100399 0.224900416 0.231538855 0.232730709 0.233964348 0.235348382 0.237897058 0.244912984 0.249400426 0.254715050 0.255393950 0.256824665 0.258974634 0.271380066 0.278194047 0.290519235 0.296745192 0.298579137 0.299687591 0.304441715 0.306391186 0.307548642 0.317755155 0.320743216 0.323439373 0.327628278 0.329262119 0.346223201 0.350713142 0.354814335 0.355781261 0.359290392 0.363875396 0.382420389 0.398043044 0.405962339 0.420908071 0.429623000 0.430496012 0.445364853 0.449110158 0.464255632 0.465167592 0.477886763 0.482445484 0.489426054 0.497624322 0.498041793 0.512372656 0.542747768 0.565303782 0.566841569 0.583311057 0.587060003 0.604546211 0.639289038 0.644259620 0.665457694 0.671948254 0.674463756 0.681463321 0.691820305 0.699050623 0.704242247 0.709005117 0.714936999 0.728664643 0.737180420 0.738398199 0.750688664 0.771579617 0.775854538 0.802655921 0.817007504 0.820061455 0.820745309 0.831438580 0.840408153 0.843137725 0.846398059 0.849591271 0.858236152 0.864351697 0.867318883 0.868306135 0.872239104 0.874128224 0.879353319 0.890079452 0.890744754 0.893883968 0.913023098 0.917884154 0.923923874 0.930875639 0.936171757 0.942826571 0.946808720 0.958565640 0.966555895 0.970020060 0.976931732 0.990107270 0.999756572 1.013204871 1.034520378 1.043137984 1.049375507 1.055262340 1.075968162 1.084592591 1.089037707 1.110026693 1.110629598 1.116366018 1.122423541 1.123338300 1.134283650 1.143263160 1.161244114 1.168939244 1.172832044 1.173483687 1.200435458 1.205034562 1.216459840 1.247304407 1.294785536 1.295736297 1.313412012 1.318510872 1.326292373 1.327093988 1.330139980 1.334517264 1.341030402 1.346028850 1.362353841 1.378782601 1.380893980 1.381362047 1.386318828 1.474826799 1.557495258 1.671862165 1.890298997</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">88</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8897229" y3="-0.95527978" z3="-0.70453988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53850833" y3="-1.95802273" z3="-1.62883917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02332208" y3="-1.00369827" z3="-1.48319496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72757262" y3="1.47238442" z3="-1.11293335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26567557" y3="0.31321748" z3="-0.51358296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61120669" y3="2.74429987" z3="-1.10104583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97479794" y3="2.73534181" z3="-0.86600785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38798328" y3="5.0064545" z3="-0.32068213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78708707" y3="3.86587682" z3="-0.79775115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77688113" y3="5.88620799" z3="-0.09543337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00983804" y3="1.62203252" z3="-1.59249242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13882127" y3="0.37259232" z3="0.2543429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68823303" y3="0.39032972" z3="-0.5395644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62323629" y3="0.72620789" z3="0.43760417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60679575" y3="-0.84899062" z3="-1.40327648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10770834" y3="-2.49065299" z3="-1.25638642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.29949878" y3="-5.49224439" z3="-6.15870396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.97866698" y3="-5.06242792" z3="-5.20547158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14570471" y3="-3.93283039" z3="-2.78476137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.93680327" y3="-3.6829929" z3="-5.05366044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62975104" y3="-5.89427983" z3="-4.13836878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22853257" y3="-5.32323993" z3="-2.93737337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.5289545" y3="-3.08580246" z3="-3.84971216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.21452239" y3="-3.01151985" z3="-5.86988041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.68493722" y3="-6.98153862" z3="-4.23418916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99779142" y3="-5.96129221" z3="-2.08003785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69079533" y3="-3.38997916" z3="-1.55585673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32083541" y3="-3.88931647" z3="-0.83983852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65221793" y3="-4.88950468" z3="-1.12627905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40787024" y3="-3.59182147" z3="0.60622613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.52463927" y3="-3.136773" z3="3.36522903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.75585914" y3="-4.63003917" z3="1.47961639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13884008" y3="-2.32110032" z3="1.12491832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19363007" y3="-2.09603001" z3="2.49613276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.80524062" y3="-4.40469818" z3="2.85377471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.94549964" y3="-5.63321496" z3="1.08586369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1048954" y3="-1.48073907" z3="0.47449487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03254462" y3="-1.09366368" z3="2.86941138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.04167729" y3="-5.23195324" z3="3.52905114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.55623113" y3="-2.96442414" z3="4.44498828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.48388607" y3="-1.75076449" z3="-3.81918401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.54094435" y3="-1.34182753" z3="-2.91003353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31009692" y3="3.73856332" z3="-0.89336608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09883598" y3="-3.02585814" z3="-1.75340061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91336047" y3="-3.17451265" z3="-0.6298074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11937253" y3="-2.27885669" z3="0.27905902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82857442" y3="-0.69949219" z3="0.50087573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.5041074" y3="-0.1344641" z3="-1.14434109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53928219" y3="0.39241705" z3="1.2651822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22495076" y3="-1.02983543" z3="1.70042929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41724721" y3="-4.37616" z3="-0.38112395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.16406042" y3="-4.58232992" z3="0.80839455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.72190535" y3="0.28008941" z3="-1.80650272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.24001387" y3="0.66706495" z3="-0.97681185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.01185008" y3="-0.95747081" z3="-1.68031952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60989057" y3="0.51328985" z3="0.67696039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.24890589" y3="0.00345568" z3="2.2538343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98611802" y3="1.39453244" z3="1.40812414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68915231" y3="-0.07511582" z3="2.00111055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01288152" y3="-1.66202514" z3="1.25461651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.85542096" y3="-1.52851638" z3="2.613082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09382804" y3="-3.9898763" z3="0.79227714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56947699" y3="-4.31796209" z3="1.69640935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40746746" y3="-5.6531236" z3="0.81870829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27448705" y3="-2.19282151" z3="-0.15726696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14401916" y3="-3.31540514" z3="-0.9879953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51094093" y3="-4.46913245" z3="-0.54150977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00643386" y3="-4.49390192" z3="0.75279512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14937421" y3="-3.41290334" z3="1.61764469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77968615" y3="-2.26462441" z3="1.15541022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4980282" y3="-3.26964521" z3="-2.02116819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37937861" y3="-5.3282463" z3="-1.19961075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26205698" y3="-5.6700329" z3="1.20576278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74113253" y3="-3.47056388" z3="2.62765758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86927816" y3="-1.40200058" z3="1.81653597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46885525" y3="4.00414168" z3="0.23974654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84489177" y3="3.81902119" z3="0.22213922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44061963" y3="3.37692698" z3="-0.9543633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6999688" y3="3.13104975" z3="-2.10805639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32193948" y3="3.30284185" z3="-2.06582672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01900432" y3="4.3191021" z3="1.16211643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45553701" y3="3.99988069" z3="1.10536829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88664609" y3="3.13925732" z3="-0.97751493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.20633203" y3="2.79952581" z3="-3.01710252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27588606" y3="3.08354831" z3="-2.95094803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14947417" y3="-5.84765136" z3="2.39763567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78116131" y3="-6.39565273" z3="0.35440449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42534724" y3="3.00391715" z3="-2.0550066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46393855" y3="3.06428799" z3="0.09638368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53186365" y3="0.14760352" z3="-2.13784328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86105243" y3="1.39565913" z3="-1.98640555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67278447" y3="0.06551314" z3="-2.98328529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11500847" y3="1.16310963" z3="-3.67914335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18525554" y3="-0.89657903" z3="-3.08008079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.9893383" y3="1.08748325" z3="-4.33157665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32641352" y3="2.50609591" z3="-2.74503203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.42245583" y3="2.39276816" z3="-3.5662456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79622785" y3="3.45824387" z3="-2.67710743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75865804" y3="3.25906161" z3="-4.14297648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58558793" y3="3.90587543" z3="-0.30577389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78463944" y3="5.06262446" z3="-0.07497258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95761343" y3="3.95456541" z3="0.07086486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.51025252" y3="5.10078013" z3="0.58981437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57681271" y3="3.06354813" z3="-0.04944906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56691535" y3="5.11193597" z3="0.87199777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38834759" y3="6.23833793" z3="0.45062483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72339912" y3="6.2638232" z3="0.76938977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76308683" y3="7.12279566" z3="0.60750145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17680253" y3="7.1721964" z3="1.17579843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28522578" y3="-3.99993955" z3="-2.90048812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48787873" y3="-5.02606729" z3="-2.55567354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.13465622" y3="-3.68361035" z3="-3.53607637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.38831022" y3="-4.01824377" z3="-3.54018423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63666051" y3="-1.65161093" z3="-2.14893247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35917886" y3="-1.17810937" z3="-2.83729251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47517046" y3="-0.98122043" z3="-1.28968403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68151001" y3="-1.7109891" z3="-2.69300142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8897,-.9553,-.7045;6.5385,-1.958,-1.6288;6.0233,-1.0037,-1.4832;4.7276,1.4724,-1.1129;4.2657,.3132,-.5136;2.6112,2.7443,-1.101;3.9748,2.7353,-.866;2.388,5.0065,-.3207;1.7871,3.8659,-.7978;1.7769,5.8862,-.0954;2.0098,1.622,-1.5925;3.1388,.3726,.2543;1.6882,.3903,-.5396;.6232,.7262,.4376;1.6068,-.849,-1.4033;1.1077,-2.4907,-1.2564;2.2995,-5.4922,-6.1587;1.9787,-5.0624,-5.2055;1.1457,-3.9328,-2.7848;1.9368,-3.683,-5.0537;1.6298,-5.8943,-4.1384;1.2285,-5.3232,-2.9374;1.529,-3.0858,-3.8497;2.2145,-3.0115,-5.8699;1.6849,-6.9815,-4.2342;.9978,-5.9613,-2.08;.6908,-3.39,-1.5559;-.3208,-3.8893,-.8398;-.6522,-4.8895,-1.1263;-.4079,-3.5918,.6062;-.5246,-3.1368,3.3652;-.7559,-4.63,1.4796;-.1388,-2.3211,1.1249;-.1936,-2.096,2.4961;-.8052,-4.4047,2.8538;-.9455,-5.6332,1.0859;.1049,-1.4807,.4745;.0325,-1.0937,2.8694;-1.0417,-5.232,3.5291;-.5562,-2.9644,4.445;1.4839,-1.7508,-3.8192;1.5409,-1.3418,-2.91;.3101,3.7386,-.8934;-2.0988,-3.0259,-1.7534;-2.9134,-3.1745,-.6298;-3.1194,-2.2789,.2791;-3.8286,-.6995,.5009;-4.5041,-.1345,-1.1443;-2.5393,.3924,1.2652;-5.225,-1.0298,1.7004;-3.4172,-4.3762,-.3811;-4.1641,-4.5823,.8084;-3.7219,.2801,-1.8065;-5.24,.6671,-.9768;-5.0119,-.9575,-1.6803;-1.6099,.5133,.677;-2.2489,.0035,2.2538;-2.9861,1.3945,1.4081;-5.6892,-.0751,2.0011;-6.0129,-1.662,1.2546;-4.8554,-1.5285,2.6131;-5.0938,-3.9899,.7923;-3.5695,-4.318,1.6964;-4.4075,-5.6531,.8187;4.2745,-2.1928,-.1573;4.144,-3.3154,-.988;3.5109,-4.4691,-.5415;3.0064,-4.4939,.7528;3.1494,-3.4129,1.6176;3.7797,-2.2646,1.1554;4.498,-3.2696,-2.0212;3.3794,-5.3282,-1.1996;2.2621,-5.67,1.2058;2.7411,-3.4706,2.6277;3.8693,-1.402,1.8165;-.4689,4.0041,.2397;-1.8449,3.819,.2221;-2.4406,3.3769,-.9544;-1.7,3.131,-2.1081;-.3219,3.3028,-2.0658;.019,4.3191,1.1621;-2.4555,3.9999,1.1054;-3.8866,3.1393,-.9775;-2.2063,2.7995,-3.0171;.2759,3.0835,-2.9509;2.1495,-5.8477,2.3976;1.7812,-6.3957,.3544;-4.4253,3.0039,-2.055;-4.4639,3.0643,.0964;6.5319,.1476,-2.1378;5.8611,1.3957,-1.9864;7.6728,.0655,-2.9833;8.115,1.1631,-3.6791;8.1853,-.8966,-3.0801;8.9893,1.0875,-4.3316;6.3264,2.5061,-2.745;7.4225,2.3928,-3.5662;5.7962,3.4582,-2.6771;7.7587,3.2591,-4.143;4.5856,3.9059,-.3058;3.7846,5.0626,-.075;5.9576,3.9546,.0709;6.5103,5.1008,.5898;6.5768,3.0635,-.0494;7.5669,5.1119,.872;4.3883,6.2383,.4506;5.7234,6.2638,.7694;3.7631,7.1228,.6075;6.1768,7.1722,1.1758;-2.2852,-3.9999,-2.9005;-2.4879,-5.0261,-2.5557;-3.1347,-3.6836,-3.5361;-1.3883,-4.0182,-3.5402;-1.6367,-1.6516,-2.1489;-2.3592,-1.1781,-2.8373;-1.4752,-.9812,-1.2897;-.6815,-1.711,-2.693;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662621039968</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.011220199787 0.001245312294 0.024339690195 0.005338043815</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053222410 -0.006164744 0.000175313 0.000241985 0.000336896 0.000342011 0.000369911 0.000427790 0.000527179 0.000645980 0.000753516 0.000816467 0.000951905 0.001083966 0.001237434 0.001248680 0.001273112 0.001369544 0.001487963 0.001580963 0.001763977 0.001964542 0.002204024 0.002448105 0.002833281 0.003014806 0.003503351 0.003618619 0.003663155 0.004354376 0.004541889 0.004686892 0.004965807 0.005200592 0.005815954 0.005826241 0.006497432 0.006778003 0.006909860 0.007433690 0.007796449 0.008372685 0.008738533 0.009182955 0.009388877 0.010135700 0.010404787 0.011503497 0.012460170 0.012924079 0.013033582 0.014088856 0.014410275 0.014689812 0.015069237 0.015467118 0.015661191 0.016281146 0.016657828 0.017259421 0.017574507 0.018026759 0.019083754 0.019916800 0.020440295 0.021800843 0.022536608 0.022678358 0.023173147 0.023588553 0.024663079 0.025989906 0.026399851 0.026691153 0.027538221 0.027796569 0.029894626 0.030428693 0.031339284 0.032386704 0.032699655 0.033627202 0.037188247 0.038552700 0.040236103 0.040678903 0.041992084 0.044098779 0.044530764 0.045297330 0.046290371 0.049669423 0.050696344 0.051001248 0.051433431 0.051605379 0.051816424 0.052282361 0.052391957 0.052578932 0.053899408 0.054892782 0.056493401 0.056857289 0.057101703 0.057578738 0.057738690 0.058596858 0.059223159 0.060455119 0.060646510 0.061220001 0.061575991 0.062454889 0.063924662 0.064361039 0.064603725 0.065323390 0.066107210 0.067979306 0.068551762 0.071199107 0.071998647 0.072683316 0.076451377 0.077802881 0.078627090 0.080808172 0.081559072 0.082584708 0.086818389 0.088003210 0.089508393 0.090890637 0.092852351 0.093822130 0.094904774 0.095288870 0.095739131 0.096625853 0.097455962 0.098195648 0.099709154 0.101080012 0.101320518 0.102806101 0.102939533 0.104054801 0.107019759 0.108721334 0.108987043 0.110475037 0.111664090 0.111826462 0.112752683 0.114356193 0.116185258 0.116495443 0.117347973 0.118819777 0.122986596 0.123690093 0.126297226 0.127145603 0.127875325 0.130032428 0.132353561 0.133657497 0.135723171 0.137040253 0.142240451 0.144434795 0.144609113 0.146048873 0.150364283 0.152801201 0.153856433 0.159454506 0.165693057 0.170666590 0.174555806 0.176653317 0.180672857 0.183273238 0.185980531 0.187668399 0.188766562 0.196268408 0.198080138 0.201851597 0.205175620 0.205490126 0.206760925 0.207165680 0.209075146 0.211410258 0.213086983 0.213615642 0.216641494 0.221117909 0.224900444 0.231539222 0.232733247 0.233973671 0.235356747 0.237944350 0.244918472 0.249415503 0.254743357 0.255394088 0.256827406 0.259057195 0.271380320 0.278263812 0.290544142 0.296755645 0.298627472 0.299692437 0.304465877 0.306426789 0.307549237 0.317784805 0.320763891 0.323479364 0.327644766 0.329282805 0.346285098 0.350734003 0.354837528 0.355790438 0.359294115 0.363876222 0.382424163 0.398042464 0.405963021 0.420962121 0.429632869 0.430495572 0.445408084 0.451801728 0.464259286 0.465360783 0.477886770 0.482767125 0.489824763 0.498001481 0.498170634 0.513004658 0.542815835 0.565390657 0.566850905 0.583333877 0.588681268 0.604644394 0.639401650 0.644341686 0.665480592 0.672414710 0.674555973 0.681463434 0.691821205 0.699051301 0.704242383 0.708989892 0.714995030 0.728773138 0.737213951 0.738440875 0.750689262 0.771579629 0.775856058 0.802784317 0.817149302 0.820087587 0.820760857 0.831441702 0.840408198 0.843153927 0.846478806 0.849750583 0.858293194 0.864383109 0.867330098 0.868825926 0.872255220 0.874164412 0.879377669 0.890230924 0.890818858 0.893932708 0.913245648 0.917884558 0.923927682 0.930880769 0.936200919 0.945113684 0.947795686 0.958684405 0.968129750 0.970580556 0.977627829 0.990413482 0.999801043 1.013288403 1.034562855 1.043200358 1.049428460 1.055273077 1.075997792 1.084591127 1.089037891 1.110030286 1.110630633 1.116366504 1.122423895 1.123339595 1.134377489 1.143506361 1.161244452 1.168952408 1.172831837 1.173504826 1.200440041 1.205157720 1.216750050 1.247304674 1.294786225 1.295739526 1.313443265 1.318598714 1.326293674 1.327102600 1.330140034 1.334517799 1.341034162 1.346028968 1.362373571 1.378783565 1.380895800 1.381364961 1.386769682 1.481110452 1.557498945 1.671862363 1.894420405</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">89</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8911091" y3="-0.95511796" z3="-0.70608361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53826641" y3="-1.95698908" z3="-1.63423244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02284724" y3="-1.00296142" z3="-1.48743352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72642095" y3="1.47238842" z3="-1.11491746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2667705" y3="0.31311838" z3="-0.51411167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60883159" y3="2.74234397" z3="-1.09967723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97292844" y3="2.73460753" z3="-0.86708009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38559067" y3="5.00473444" z3="-0.31987159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78447336" y3="3.86367581" z3="-0.79575452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77448724" y3="5.88421272" z3="-0.09472262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00681017" y3="1.61970499" z3="-1.58917621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14150822" y3="0.37229778" z3="0.25607944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68951758" y3="0.38750107" z3="-0.53522425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6257581" y3="0.72191766" z3="0.44378726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60875512" y3="-0.85184096" z3="-1.39837268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10877262" y3="-2.49382546" z3="-1.25328814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.31192245" y3="-5.49532376" z3="-6.15226446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.98839196" y3="-5.06553038" z3="-5.19998033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14945983" y3="-3.93585523" z3="-2.7810502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.94754728" y3="-3.68610027" z3="-5.04770127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.63506838" y3="-5.89732807" z3="-4.13434329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.2310447" y3="-5.3262583" z3="-2.93439846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.53649022" y3="-3.08902126" z3="-3.8448823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.22860501" y3="-3.01463213" z3="-5.86277339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.68951444" y3="-6.98463653" z3="-4.2302362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99729755" y3="-5.96425597" z3="-2.07781853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69364856" y3="-3.3941145" z3="-1.55266116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32586225" y3="-3.88708758" z3="-0.84158173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65319694" y3="-4.89071063" z3="-1.1274078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41066183" y3="-3.59640423" z3="0.60637297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.53340912" y3="-3.14640742" z3="3.36650055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.76348573" y3="-4.63517842" z3="1.47742579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13828903" y3="-2.32821189" z3="1.12849888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19638119" y3="-2.10549464" z3="2.50006737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.81626675" y3="-4.41223023" z3="2.85188155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.95715594" y3="-5.6355658" z3="1.08093506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10842335" y3="-1.48655773" z3="0.47971006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03044475" y3="-1.10370316" z3="2.87557407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.0587776" y3="-5.2390581" z3="3.52425957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.56842323" y3="-2.97519836" z3="4.44638107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49270644" y3="-1.75369262" z3="-3.81408408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.54729588" y3="-1.34514187" z3="-2.90498031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30718893" y3="3.73774969" z3="-0.89162825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09029728" y3="-3.02824854" z3="-1.75324236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91164825" y3="-3.17317347" z3="-0.63025016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11904593" y3="-2.27378728" z3="0.27544826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82096675" y3="-0.69342555" z3="0.50407328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.48671588" y3="-0.12504096" z3="-1.14718861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53231368" y3="0.39304421" z3="1.27248232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22820223" y3="-1.02698255" z3="1.69510019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41865007" y3="-4.37246443" z3="-0.38496852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.17029188" y3="-4.57833698" z3="0.80142761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.70782812" y3="0.28453953" z3="-1.80458161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.2443367" y3="0.67062685" z3="-0.9857277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.98751039" y3="-0.9499945" z3="-1.68751745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60056819" y3="0.51046156" z3="0.68909202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25108796" y3="0.00075445" z3="2.26796387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97914179" y3="1.39451222" z3="1.41452682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69442457" y3="-0.06695378" z3="1.99078991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01880051" y3="-1.6526698" z3="1.24341042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.86646367" y3="-1.52838089" z3="2.61316695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09694496" y3="-3.98225742" z3="0.78402485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.57773145" y3="-4.31762912" z3="1.69148459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.41695485" y3="-5.64793674" z3="0.80897686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27740668" y3="-2.19272361" z3="-0.15729419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14625329" y3="-3.31588952" z3="-0.98703212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51267247" y3="-4.46888814" z3="-0.53941562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00837236" y3="-4.49238835" z3="0.75493379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15269918" y3="-3.41102941" z3="1.61907589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78366957" y3="-2.26357362" z3="1.15584416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49956922" y3="-3.27106761" z3="-2.02047367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38015237" y3="-5.32821809" z3="-1.19689744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26204607" y3="-5.66699096" z3="1.20858686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7448545" y3="-3.46774033" z3="2.62928172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87411153" y3="-1.40054293" z3="1.81625971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47045686" y3="4.00307715" z3="0.24369291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84779152" y3="3.82209737" z3="0.22510199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44555796" y3="3.38270604" z3="-0.95229207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70546005" y3="3.13498889" z3="-2.1055348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32691563" y3="3.30445677" z3="-2.06531676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.02444535" y3="4.3076565" z3="1.17339561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45421126" y3="3.99633453" z3="1.11791399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88866743" y3="3.13988618" z3="-0.9677095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.20673822" y3="2.79515411" z3="-3.00752765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.2691346" y3="3.08220755" z3="-2.95273069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14693577" y3="-5.84212569" z3="2.40064056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78224866" y3="-6.39386588" z3="0.35779585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42592965" y3="3.00621349" z3="-2.04468548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46838459" y3="3.07018025" z3="0.09719662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52910903" y3="0.14852305" z3="-2.14353624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85798387" y3="1.39625933" z3="-1.99082465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66799406" y3="0.06682176" z3="-2.99173646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.10802317" y3="1.1644806" z3="-3.68888944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18066707" y3="-0.89505377" z3="-3.08961003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.9808207" y3="1.08913585" z3="-4.34339111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32099132" y3="2.50675368" z3="-2.75080971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.41516004" y3="2.39380649" z3="-3.57458653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79049718" y3="3.45864881" z3="-2.68194139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.74961225" y3="3.26014255" z3="-4.15228663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58392837" y3="3.9058155" z3="-0.30836284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78259248" y3="5.0620064" z3="-0.07639445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9565415" y3="3.955899" z3="0.06567264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50920147" y3="5.10267629" z3="0.58326249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57631088" y3="3.06556594" z3="-0.05545345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56629439" y3="5.11488131" z3="0.86346636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38631679" y3="6.23835159" z3="0.44770765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72182237" y3="6.26507386" z3="0.76405423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.76081751" y3="7.12242019" z3="0.60544437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17523625" y3="7.1738827" z3="1.16938316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28264292" y3="-3.99475409" z3="-2.90327322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49204539" y3="-5.01969217" z3="-2.56308875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.12820827" y3="-3.67198018" z3="-3.53873521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.38454787" y3="-4.01532348" z3="-3.54124005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63126764" y3="-1.64986126" z3="-2.14711367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3536578" y3="-1.17379334" z3="-2.83454558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46768248" y3="-0.98167191" z3="-1.2864487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.6737258" y3="-1.7107382" z3="-2.68979915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8911,-.9551,-.7061;6.5383,-1.957,-1.6342;6.0228,-1.003,-1.4874;4.7264,1.4724,-1.1149;4.2668,.3131,-.5141;2.6088,2.7423,-1.0997;3.9729,2.7346,-.8671;2.3856,5.0047,-.3199;1.7845,3.8637,-.7958;1.7745,5.8842,-.0947;2.0068,1.6197,-1.5892;3.1415,.3723,.2561;1.6895,.3875,-.5352;.6258,.7219,.4438;1.6088,-.8518,-1.3984;1.1088,-2.4938,-1.2533;2.3119,-5.4953,-6.1523;1.9884,-5.0655,-5.2;1.1495,-3.9359,-2.7811;1.9475,-3.6861,-5.0477;1.6351,-5.8973,-4.1343;1.231,-5.3263,-2.9344;1.5365,-3.089,-3.8449;2.2286,-3.0146,-5.8628;1.6895,-6.9846,-4.2302;.9973,-5.9643,-2.0778;.6936,-3.3941,-1.5527;-.3259,-3.8871,-.8416;-.6532,-4.8907,-1.1274;-.4107,-3.5964,.6064;-.5334,-3.1464,3.3665;-.7635,-4.6352,1.4774;-.1383,-2.3282,1.1285;-.1964,-2.1055,2.5001;-.8163,-4.4122,2.8519;-.9572,-5.6356,1.0809;.1084,-1.4866,.4797;.0304,-1.1037,2.8756;-1.0588,-5.2391,3.5243;-.5684,-2.9752,4.4464;1.4927,-1.7537,-3.8141;1.5473,-1.3451,-2.905;.3072,3.7377,-.8916;-2.0903,-3.0282,-1.7532;-2.9116,-3.1732,-.6303;-3.119,-2.2738,.2754;-3.821,-.6934,.5041;-4.4867,-.125,-1.1472;-2.5323,.393,1.2725;-5.2282,-1.027,1.6951;-3.4187,-4.3725,-.385;-4.1703,-4.5783,.8014;-3.7078,.2845,-1.8046;-5.2443,.6706,-.9857;-4.9875,-.95,-1.6875;-1.6006,.5105,.6891;-2.2511,.0008,2.268;-2.9791,1.3945,1.4145;-5.6944,-.067,1.9908;-6.0188,-1.6527,1.2434;-4.8665,-1.5284,2.6132;-5.0969,-3.9823,.784;-3.5777,-4.3176,1.6915;-4.417,-5.6479,.809;4.2774,-2.1927,-.1573;4.1463,-3.3159,-.987;3.5127,-4.4689,-.5394;3.0084,-4.4924,.7549;3.1527,-3.411,1.6191;3.7837,-2.2636,1.1558;4.4996,-3.2711,-2.0205;3.3802,-5.3282,-1.1969;2.262,-5.667,1.2086;2.7449,-3.4677,2.6293;3.8741,-1.4005,1.8163;-.4705,4.0031,.2437;-1.8478,3.8221,.2251;-2.4456,3.3827,-.9523;-1.7055,3.135,-2.1055;-.3269,3.3045,-2.0653;.0244,4.3077,1.1734;-2.4542,3.9963,1.1179;-3.8887,3.1399,-.9677;-2.2067,2.7952,-3.0075;.2691,3.0822,-2.9527;2.1469,-5.8421,2.4006;1.7822,-6.3939,.3578;-4.4259,3.0062,-2.0447;-4.4684,3.0702,.0972;6.5291,.1485,-2.1435;5.858,1.3963,-1.9908;7.668,.0668,-2.9917;8.108,1.1645,-3.6889;8.1807,-.8951,-3.0896;8.9808,1.0891,-4.3434;6.321,2.5068,-2.7508;7.4152,2.3938,-3.5746;5.7905,3.4586,-2.6819;7.7496,3.2601,-4.1523;4.5839,3.9058,-.3084;3.7826,5.062,-.0764;5.9565,3.9559,.0657;6.5092,5.1027,.5833;6.5763,3.0656,-.0555;7.5663,5.1149,.8635;4.3863,6.2384,.4477;5.7218,6.2651,.7641;3.7608,7.1224,.6054;6.1752,7.1739,1.1694;-2.2826,-3.9948,-2.9033;-2.492,-5.0197,-2.5631;-3.1282,-3.672,-3.5387;-1.3845,-4.0153,-3.5412;-1.6313,-1.6499,-2.1471;-2.3537,-1.1738,-2.8345;-1.4677,-.9817,-1.2864;-.6737,-1.7107,-2.6898;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662595956346</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007570731350 0.001139845047 0.019123695096 0.005337440360</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053600224 -0.006518988 0.000173217 0.000249520 0.000337276 0.000349115 0.000370513 0.000431735 0.000526074 0.000645904 0.000754506 0.000815280 0.000951812 0.001084081 0.001237432 0.001249378 0.001274110 0.001369531 0.001488667 0.001580683 0.001765764 0.001994345 0.002204322 0.002449096 0.002870044 0.003020664 0.003508169 0.003618998 0.003664568 0.004356509 0.004552446 0.004741186 0.004988448 0.005239728 0.005817580 0.005833119 0.006499589 0.006777622 0.006919934 0.007433669 0.007797268 0.008373145 0.008771070 0.009187305 0.009426049 0.010136514 0.010412565 0.011504449 0.012487056 0.012931116 0.013034573 0.014102036 0.014413266 0.014703792 0.015088583 0.015477380 0.015661354 0.016287228 0.016685082 0.017262116 0.017583741 0.018027661 0.019083140 0.019931992 0.020439976 0.021869009 0.022550369 0.022873217 0.023192834 0.023635626 0.024708766 0.026002942 0.026400721 0.026691117 0.027536618 0.027796400 0.029929849 0.030433301 0.031466390 0.032417645 0.032701290 0.034088530 0.037203502 0.038613038 0.040398997 0.040710534 0.043150846 0.044259080 0.044596930 0.045297758 0.046401403 0.049669474 0.050822170 0.051429457 0.051602976 0.051804105 0.051919559 0.052282976 0.052400225 0.052578652 0.053945865 0.055062243 0.056493380 0.056861731 0.057132685 0.057735466 0.057984297 0.058604975 0.059224130 0.060509489 0.060656922 0.061512807 0.061643739 0.062478271 0.063941634 0.064360565 0.064615044 0.065433270 0.066121899 0.067984285 0.068551395 0.071201551 0.072068158 0.072693581 0.076457112 0.078609477 0.078751987 0.080807092 0.081965411 0.083089501 0.086844339 0.088192984 0.089521946 0.090903140 0.092852432 0.093932534 0.094894632 0.095296329 0.095749918 0.096637452 0.097551658 0.098383476 0.099711746 0.101082623 0.101320493 0.102818142 0.103003641 0.104054945 0.107023674 0.108930682 0.109226544 0.110485512 0.111674756 0.112188105 0.112831247 0.114430774 0.116447195 0.116790788 0.117356613 0.119066727 0.123016335 0.123690376 0.126869539 0.127192030 0.127921459 0.130092573 0.132367951 0.133670376 0.135733012 0.137040702 0.142240235 0.144481085 0.144637897 0.146048855 0.150410671 0.152811291 0.153851144 0.159490639 0.165694894 0.170668699 0.174556883 0.176659382 0.180673074 0.183275581 0.185984250 0.187678614 0.188775195 0.196721415 0.198426796 0.201855210 0.205267553 0.205566694 0.207010421 0.207205864 0.209076746 0.211410273 0.213141523 0.214404252 0.216682442 0.221179320 0.224900449 0.231539417 0.232733534 0.233982316 0.235361570 0.237944820 0.244940944 0.249414242 0.254769903 0.255402351 0.256842265 0.259133111 0.271380531 0.278322604 0.290649153 0.296801876 0.298655476 0.299763072 0.304547759 0.306460240 0.307551055 0.317783089 0.320832700 0.323697861 0.327643681 0.329288731 0.346485174 0.350828975 0.354911998 0.356220619 0.359300770 0.363879283 0.382532569 0.398058504 0.405965391 0.421154397 0.429641485 0.430495614 0.445419897 0.453375950 0.464264441 0.465405047 0.477886797 0.482789543 0.492567657 0.498015573 0.498186139 0.513243405 0.542828344 0.565436345 0.566894195 0.583338675 0.589903085 0.604837953 0.639881960 0.644375182 0.665505880 0.672953082 0.675741656 0.681470170 0.691821680 0.699061484 0.704242607 0.709776491 0.715011249 0.729325623 0.737237672 0.738532791 0.750692015 0.771579646 0.775856357 0.802857226 0.817216025 0.820091304 0.820800349 0.831473527 0.840408559 0.843162025 0.846525498 0.849847959 0.858322975 0.864392337 0.867332779 0.869043269 0.872256355 0.874426061 0.879906890 0.890427757 0.890853795 0.893982922 0.913892027 0.918012881 0.923932153 0.930895226 0.936201940 0.945397097 0.950070672 0.958786129 0.968869416 0.971794110 0.978286552 0.990489014 0.999804550 1.013330412 1.034571747 1.043205383 1.049539496 1.055281601 1.076014255 1.084682988 1.089127607 1.110050140 1.110650602 1.116366485 1.122429625 1.123352684 1.134475209 1.143783838 1.161244492 1.169093560 1.172834076 1.173750648 1.200467103 1.206254162 1.217142677 1.247305252 1.294786809 1.295755398 1.313485158 1.318651741 1.326294665 1.327120089 1.330140102 1.334519001 1.341040791 1.346031173 1.362382620 1.378783544 1.380896531 1.381365748 1.386887044 1.484562105 1.557505662 1.671862635 1.894882577</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">90</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89286645" y3="-0.95491417" z3="-0.70784942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53826615" y3="-1.95595652" z3="-1.64007849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02263349" y3="-1.00223463" z3="-1.49210619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72551809" y3="1.4722675" z3="-1.11730402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26820105" y3="0.31300094" z3="-0.51484431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60705501" y3="2.74045286" z3="-1.09826658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97155073" y3="2.73391426" z3="-0.86838942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38337424" y3="5.00299857" z3="-0.31827986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78266213" y3="3.86146138" z3="-0.79298221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.77157521" y3="5.88188167" z3="-0.09176943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00482256" y3="1.61698995" z3="-1.58574694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14461068" y3="0.37193939" z3="0.25790389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69110195" y3="0.38496172" z3="-0.53063005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6287375" y3="0.7181458" z3="0.45028954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6103982" y3="-0.85504225" z3="-1.3930581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11119304" y3="-2.49739886" z3="-1.2490686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32439626" y3="-5.49968143" z3="-6.14508502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.99833129" y3="-5.06962174" z3="-5.19377152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15332645" y3="-3.93909326" z3="-2.7774308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.95881824" y3="-3.69017129" z3="-5.0414786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64049207" y3="-5.90111252" z3="-4.12935616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23344614" y3="-5.32963161" z3="-2.93055879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.54481189" y3="-3.09260561" z3="-3.83988118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.24334313" y3="-3.01887492" z3="-5.85548768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69374087" y3="-6.98846487" z3="-4.22525336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99650689" y3="-5.96747734" z3="-2.07475718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69456244" y3="-3.39597998" z3="-1.55037754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32408325" y3="-3.89125249" z3="-0.83983338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65472472" y3="-4.89175271" z3="-1.12907673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41264433" y3="-3.60080438" z3="0.6076279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5429665" y3="-3.15552655" z3="3.36770077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.77229283" y3="-4.63975204" z3="1.47515301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13778989" y3="-2.33434448" z3="1.13280716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19944476" y3="-2.1142785" z3="2.50457809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.82879035" y3="-4.41921577" z3="2.84968356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.96804759" y3="-5.63912887" z3="1.076064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11446987" y3="-1.49306263" z3="0.48675159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02983016" y3="-1.11479586" z3="2.88313036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.07657568" y3="-5.24642656" z3="3.51988344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.58085381" y3="-2.98635804" z3="4.4477579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.50305868" y3="-1.75740191" z3="-3.80924741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.55377851" y3="-1.34856948" z3="-2.89970639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30547684" y3="3.73327618" z3="-0.88469702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.08990865" y3="-3.02307097" z3="-1.75380238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91128186" y3="-3.16894855" z3="-0.63258806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11629746" y3="-2.27415573" z3="0.27717488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82149348" y3="-0.69082272" z3="0.50089692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.48080694" y3="-0.12065068" z3="-1.15075987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53292565" y3="0.3908809" z3="1.27630728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23042774" y3="-1.01915864" z3="1.68767214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42224483" y3="-4.36777308" z3="-0.39060974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.17640431" y3="-4.57374319" z3="0.7943371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.69364051" y3="0.2983933" z3="-1.80195998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22521301" y3="0.67438572" z3="-0.98541757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.97533698" y3="-0.94465434" z3="-1.69223464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.598377" y3="0.50767131" z3="0.69646703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25427833" y3="-0.00070944" z3="2.26877944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97568837" y3="1.39263055" z3="1.41935677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69644687" y3="-0.06585817" z3="1.98955552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01589607" y3="-1.64734665" z3="1.23126582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.86871061" y3="-1.51791944" z3="2.60028517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.10233285" y3="-3.97580778" z3="0.77458442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.58494944" y3="-4.31367299" z3="1.68636111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.42524844" y3="-5.64373854" z3="0.80147668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28069135" y3="-2.19250165" z3="-0.15737077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1488204" y3="-3.31641105" z3="-0.98605274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51478834" y3="-4.46875038" z3="-0.53718455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01052111" y3="-4.49065316" z3="0.75723613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15629968" y3="-3.40877998" z3="1.62058591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78800146" y3="-2.26218405" z3="1.1562433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50149568" y3="-3.27264219" z3="-2.01977155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3813915" y3="-5.32856756" z3="-1.19396131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26217678" y3="-5.66373129" z3="1.21175541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74879947" y3="-3.46442642" z3="2.63097645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87924843" y3="-1.39856686" z3="1.81585581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47049852" y3="3.99754711" z3="0.25173693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84763728" y3="3.81733074" z3="0.23480635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44406027" y3="3.37556807" z3="-0.93872941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70607053" y3="3.12898126" z3="-2.09448542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3286327" y3="3.30037475" z3="-2.0578364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01906691" y3="4.31016939" z3="1.17372196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45710028" y3="4.00003165" z3="1.11709325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89227127" y3="3.14562061" z3="-0.96343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21870811" y3="2.80532808" z3="-3.00867335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.26501737" y3="3.0851475" z3="-2.95054967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14450404" y3="-5.83635314" z3="2.40389238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78338088" y3="-6.39179559" z3="0.36140413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43418141" y3="3.02005816" z3="-2.04076487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46884461" y3="3.07047097" z3="0.10625383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52645143" y3="0.14939695" z3="-2.14987154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85493489" y3="1.39672443" z3="-1.99588027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66311013" y3="0.06825755" z3="-3.00109296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.10052147" y3="1.16604138" z3="-3.69972802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17609335" y3="-0.89332499" z3="-3.10010365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.97159157" y3="1.09107752" z3="-4.35659794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.31515425" y3="2.50741676" z3="-2.75724521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.40721395" y3="2.39498791" z3="-3.58388686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78416615" y3="3.4589684" z3="-2.68710342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.73956571" y3="3.26139884" z3="-4.1626999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58253836" y3="3.90572331" z3="-0.31100897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78069951" y3="5.06126785" z3="-0.07727928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.955858" y3="3.95697452" z3="0.0602122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50848588" y3="5.10421489" z3="0.57683728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5761829" y3="3.06716018" z3="-0.06237585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5662058" y3="5.11736831" z3="0.85472055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38418346" y3="6.23800447" z3="0.44610689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.72036155" y3="6.26585738" z3="0.75967047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7579909" y3="7.12134698" z3="0.60545022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.173681" y3="7.17499405" z3="1.16436312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28035201" y3="-3.98943341" z3="-2.90604596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49548508" y3="-5.01452817" z3="-2.56704841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.12228432" y3="-3.66191676" z3="-3.54512106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.37993975" y3="-4.01344891" z3="-3.54071012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.62324034" y3="-1.64771362" z3="-2.14508184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34379001" y3="-1.16774125" z3="-2.83181552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.45828527" y3="-0.98157227" z3="-1.28263402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.66798172" y3="-1.71039057" z3="-2.68892788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8929,-.9549,-.7078;6.5383,-1.956,-1.6401;6.0226,-1.0022,-1.4921;4.7255,1.4723,-1.1173;4.2682,.313,-.5148;2.6071,2.7405,-1.0983;3.9716,2.7339,-.8684;2.3834,5.003,-.3183;1.7827,3.8615,-.793;1.7716,5.8819,-.0918;2.0048,1.617,-1.5857;3.1446,.3719,.2579;1.6911,.385,-.5306;.6287,.7181,.4503;1.6104,-.855,-1.3931;1.1112,-2.4974,-1.2491;2.3244,-5.4997,-6.1451;1.9983,-5.0696,-5.1938;1.1533,-3.9391,-2.7774;1.9588,-3.6902,-5.0415;1.6405,-5.9011,-4.1294;1.2334,-5.3296,-2.9306;1.5448,-3.0926,-3.8399;2.2433,-3.0189,-5.8555;1.6937,-6.9885,-4.2253;.9965,-5.9675,-2.0748;.6946,-3.396,-1.5504;-.3241,-3.8913,-.8398;-.6547,-4.8918,-1.1291;-.4126,-3.6008,.6076;-.543,-3.1555,3.3677;-.7723,-4.6398,1.4752;-.1378,-2.3343,1.1328;-.1994,-2.1143,2.5046;-.8288,-4.4192,2.8497;-.968,-5.6391,1.0761;.1145,-1.4931,.4868;.0298,-1.1148,2.8831;-1.0766,-5.2464,3.5199;-.5809,-2.9864,4.4478;1.5031,-1.7574,-3.8092;1.5538,-1.3486,-2.8997;.3055,3.7333,-.8847;-2.0899,-3.0231,-1.7538;-2.9113,-3.1689,-.6326;-3.1163,-2.2742,.2772;-3.8215,-.6908,.5009;-4.4808,-.1207,-1.1508;-2.5329,.3909,1.2763;-5.2304,-1.0192,1.6877;-3.4222,-4.3678,-.3906;-4.1764,-4.5737,.7943;-3.6936,.2984,-1.802;-5.2252,.6744,-.9854;-4.9753,-.9447,-1.6922;-1.5984,.5077,.6965;-2.2543,-.0007,2.2688;-2.9757,1.3926,1.4194;-5.6964,-.0659,1.9896;-6.0159,-1.6473,1.2313;-4.8687,-1.5179,2.6003;-5.1023,-3.9758,.7746;-3.5849,-4.3137,1.6864;-4.4252,-5.6437,.8015;4.2807,-2.1925,-.1574;4.1488,-3.3164,-.9861;3.5148,-4.4688,-.5372;3.0105,-4.4907,.7572;3.1563,-3.4088,1.6206;3.788,-2.2622,1.1562;4.5015,-3.2726,-2.0198;3.3814,-5.3286,-1.194;2.2622,-5.6637,1.2118;2.7488,-3.4644,2.631;3.8792,-1.3986,1.8159;-.4705,3.9975,.2517;-1.8476,3.8173,.2348;-2.4441,3.3756,-.9387;-1.7061,3.129,-2.0945;-.3286,3.3004,-2.0578;.0191,4.3102,1.1737;-2.4571,4,1.1171;-3.8923,3.1456,-.9634;-2.2187,2.8053,-3.0087;.265,3.0851,-2.9505;2.1445,-5.8364,2.4039;1.7834,-6.3918,.3614;-4.4342,3.0201,-2.0408;-4.4688,3.0705,.1063;6.5265,.1494,-2.1499;5.8549,1.3967,-1.9959;7.6631,.0683,-3.0011;8.1005,1.166,-3.6997;8.1761,-.8933,-3.1001;8.9716,1.0911,-4.3566;6.3152,2.5074,-2.7572;7.4072,2.395,-3.5839;5.7842,3.459,-2.6871;7.7396,3.2614,-4.1627;4.5825,3.9057,-.311;3.7807,5.0613,-.0773;5.9559,3.957,.0602;6.5085,5.1042,.5768;6.5762,3.0672,-.0624;7.5662,5.1174,.8547;4.3842,6.238,.4461;5.7204,6.2659,.7597;3.758,7.1213,.6055;6.1737,7.175,1.1644;-2.2804,-3.9894,-2.906;-2.4955,-5.0145,-2.567;-3.1223,-3.6619,-3.5451;-1.3799,-4.0134,-3.5407;-1.6232,-1.6477,-2.1451;-2.3438,-1.1677,-2.8318;-1.4583,-.9816,-1.2826;-.668,-1.7104,-2.6889;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662595845146</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006643257842 0.001078215215 0.015813764218 0.005338123968</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053721775 -0.006096043 0.000173465 0.000243527 0.000336673 0.000347232 0.000371886 0.000430845 0.000525759 0.000646337 0.000754661 0.000814884 0.000951784 0.001085424 0.001239843 0.001249487 0.001274198 0.001379001 0.001488648 0.001582109 0.001765683 0.001995467 0.002207451 0.002462732 0.002873878 0.003032946 0.003561756 0.003622923 0.003674893 0.004356554 0.004572355 0.004737830 0.004986590 0.005277717 0.005830405 0.005838648 0.006505629 0.006789287 0.006935450 0.007435686 0.007798895 0.008373636 0.008781464 0.009190012 0.009433853 0.010139002 0.010412375 0.011507180 0.012489798 0.012938322 0.013040328 0.014105618 0.014414685 0.014704137 0.015092536 0.015476462 0.015661551 0.016286881 0.016694656 0.017265147 0.017583916 0.018030155 0.019090138 0.019930593 0.020448244 0.021865775 0.022553191 0.022870800 0.023190333 0.023655214 0.024728926 0.026009265 0.026400718 0.026691617 0.027564074 0.027798772 0.029953671 0.030436180 0.031667374 0.032424914 0.032704026 0.034450569 0.037314211 0.038646213 0.040488913 0.040714696 0.043827357 0.044404786 0.045001926 0.045320355 0.046610165 0.049669520 0.050813022 0.051428396 0.051601695 0.051813424 0.052280124 0.052364944 0.052576657 0.052689191 0.054020920 0.055278932 0.056493341 0.056865871 0.057138814 0.057737656 0.058330913 0.058615345 0.059224635 0.060610932 0.060820044 0.061553584 0.062384592 0.062909649 0.063959039 0.064376772 0.064613824 0.065691205 0.066146916 0.067990921 0.068561054 0.071204127 0.072161992 0.072711942 0.076458468 0.078638276 0.079501164 0.080812980 0.081983714 0.083413772 0.086963869 0.088431815 0.089538773 0.090902353 0.092852432 0.094052194 0.095154081 0.095333862 0.095835353 0.096652022 0.097669843 0.098817492 0.099717667 0.101084254 0.101321143 0.102844265 0.103084754 0.104060190 0.107046288 0.108928028 0.109384228 0.110485653 0.111677833 0.112190661 0.112849679 0.114518727 0.116458123 0.117030058 0.117466042 0.119544295 0.123083753 0.123714019 0.127069434 0.127276262 0.127950042 0.130212192 0.132366323 0.133669053 0.135732132 0.137044215 0.142245605 0.144481962 0.144659220 0.146051426 0.150440176 0.152821626 0.153922096 0.159494712 0.165714006 0.170668603 0.174558761 0.176662084 0.180673589 0.183275713 0.185994438 0.187692121 0.188775449 0.196967006 0.198700465 0.201855288 0.205337019 0.205705233 0.207136827 0.207910721 0.209079332 0.211410881 0.213147192 0.214718649 0.216683950 0.221216495 0.224900476 0.231539384 0.232735983 0.233982963 0.235361546 0.238013703 0.244946295 0.249415003 0.254787970 0.255411639 0.256857592 0.259156987 0.271380640 0.278343341 0.290743217 0.296851112 0.298671769 0.299838796 0.304613126 0.306474028 0.307552558 0.317791689 0.320887710 0.323925954 0.327652997 0.329288599 0.346614039 0.350899844 0.354957360 0.356560417 0.359300886 0.363879730 0.382631864 0.398159701 0.405971284 0.421166452 0.429700314 0.430522308 0.445426458 0.454721762 0.464267706 0.465439094 0.477886804 0.482790057 0.495616648 0.498041876 0.500092999 0.513291820 0.542828172 0.565448643 0.566968110 0.583338599 0.590341322 0.605025617 0.640351131 0.644377154 0.665518231 0.673072748 0.678430362 0.681541986 0.691824961 0.699086273 0.704242668 0.711472878 0.715013461 0.729708090 0.737269956 0.738774628 0.750694912 0.771579785 0.775856609 0.802893954 0.817225026 0.820091217 0.820818824 0.831490262 0.840408559 0.843172006 0.846526417 0.849860625 0.858324757 0.864393229 0.867333489 0.869098178 0.872301817 0.874686741 0.880720648 0.890492124 0.890854708 0.893982173 0.914824315 0.918102798 0.923932844 0.930912015 0.936213535 0.945396993 0.951663301 0.958812733 0.969162925 0.973052958 0.978531913 0.990517730 0.999824914 1.013329791 1.034722548 1.043373058 1.049630290 1.055283340 1.076020181 1.084912554 1.089409773 1.110080413 1.110699259 1.116366623 1.122441431 1.123377593 1.134497121 1.143878466 1.161245363 1.169387866 1.172835384 1.174376224 1.200500937 1.208955549 1.217699583 1.247306164 1.294828177 1.295775069 1.313538708 1.318764872 1.326299332 1.327149079 1.330140168 1.334521097 1.341041129 1.346044525 1.362386123 1.378783516 1.380896524 1.381367444 1.386906841 1.485217450 1.557507177 1.671862919 1.894880482</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">91</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8949438" y3="-0.95461483" z3="-0.70995206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53852716" y3="-1.95471471" z3="-1.64642561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0225962" y3="-1.00132877" z3="-1.49732271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72448206" y3="1.47241185" z3="-1.11979439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26985194" y3="0.3129675" z3="-0.51569202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60458497" y3="2.7387618" z3="-1.09540277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96981046" y3="2.73349212" z3="-0.86892525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38066853" y3="5.00068997" z3="-0.31449084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77957582" y3="3.85878386" z3="-0.78848328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76890076" y3="5.8792739" z3="-0.08670255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00277374" y3="1.61456539" z3="-1.58161976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14810316" y3="0.37138339" z3="0.25984177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69296164" y3="0.38203959" z3="-0.52574848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63186931" y3="0.7137314" z3="0.45703957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6124338" y3="-0.85808539" z3="-1.38791573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11250488" y3="-2.50102954" z3="-1.24511845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.33627498" y3="-5.50524635" z3="-6.13744507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00786351" y3="-5.07459846" z3="-5.1871859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15676514" y3="-3.94256889" z3="-2.77342061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.96984088" y3="-3.69503633" z3="-5.03506506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64541147" y3="-5.90544981" z3="-4.12384087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23546905" y3="-5.33323595" z3="-2.9263497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.5527398" y3="-3.09679361" z3="-3.83482984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.25795861" y3="-3.02427301" z3="-5.84829109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69739334" y3="-6.99291218" z3="-4.21944887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9952823" y3="-5.97062098" z3="-2.07109786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69587658" y3="-3.39931781" z3="-1.54739285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32665291" y3="-3.89200413" z3="-0.8402189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65718041" y3="-4.89272196" z3="-1.13049045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41629668" y3="-3.60467778" z3="0.60827461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.55253894" y3="-3.1641037" z3="3.36919073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.78065237" y3="-4.64467411" z3="1.47335035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1381324" y3="-2.34017531" z3="1.13673405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.20315719" y3="-2.12227955" z3="2.50881759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.84021203" y3="-4.42650718" z3="2.84824142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.97698929" y3="-5.64369064" z3="1.07231388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12006002" y3="-1.49870828" z3="0.49335777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02878784" y3="-1.12428904" z3="2.89003622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.09095785" y3="-5.2549165" z3="3.51681206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.592612" y3="-2.9970919" z3="4.44949969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51280733" y3="-1.76140259" z3="-3.80426301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.56115579" y3="-1.35279395" z3="-2.89480287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30218123" y3="3.73268403" z3="-0.88145562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.08481712" y3="-3.02140454" z3="-1.75456011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9114987" y3="-3.16580132" z3="-0.6365731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11747337" y3="-2.26940331" z3="0.2719703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81663021" y3="-0.68704263" z3="0.49838052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.47047524" y3="-0.11212594" z3="-1.15017182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52955922" y3="0.39128825" z3="1.2783555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22674996" y3="-1.01547476" z3="1.67900233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4269254" y3="-4.36261967" z3="-0.39725893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.18305786" y3="-4.56862835" z3="0.78687678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.68865956" y3="0.30763353" z3="-1.79745629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22272714" y3="0.68106549" z3="-0.98848946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.96317367" y3="-0.93594461" z3="-1.70335383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59162319" y3="0.50528162" z3="0.70216526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25827675" y3="-0.00643433" z3="2.27351984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97008883" y3="1.39649426" z3="1.4188959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.690752" y3="-0.05615978" z3="1.97758189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01617352" y3="-1.63668042" z3="1.22091914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.87380539" y3="-1.52296423" z3="2.59744627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.10827554" y3="-3.96963056" z3="0.7668238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5917394" y3="-4.3110798" z3="1.6793741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.43368959" y3="-5.63783867" z3="0.79192788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28440398" y3="-2.19223379" z3="-0.15763674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15161279" y3="-3.31688295" z3="-0.98515919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51684917" y3="-4.46833897" z3="-0.53501734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01255836" y3="-4.4885037" z3="0.75943328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16002528" y3="-3.40617628" z3="1.6219269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79273118" y3="-2.26064143" z3="1.15645173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50366619" y3="-3.27431917" z3="-2.01916134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38242539" y3="-5.32853009" z3="-1.19108661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26220923" y3="-5.6600451" z3="1.2149518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75283042" y3="-3.46056678" z3="2.63250845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88495735" y3="-1.39651422" z3="1.81522703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47412494" y3="4.00034352" z3="0.25277177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85107886" y3="3.82075675" z3="0.23711176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45210971" y3="3.38538842" z3="-0.94187434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.7135193" y3="3.13600345" z3="-2.09540282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33382381" y3="3.30004475" z3="-2.05346071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01985182" y3="4.30736272" z3="1.17978219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45726534" y3="3.99859191" z3="1.1285857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89569465" y3="3.14823892" z3="-0.95503915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21505148" y3="2.79639081" z3="-2.99498955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.26301383" y3="3.07393871" z3="-2.9347359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14227421" y3="-5.83022618" z3="2.40726857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78429463" y3="-6.38938929" z3="0.36523445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43681847" y3="3.02743653" z3="-2.03333022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47195192" y3="3.06818888" z3="0.11423479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52368921" y3="0.15049115" z3="-2.15693654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85162487" y3="1.39739872" z3="-2.00146153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.65801519" y3="0.06998592" z3="-3.01137796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.09261654" y3="1.16791085" z3="-3.71157163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17150724" y3="-0.89120676" z3="-3.11160176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.96185778" y3="1.09341226" z3="-4.37092497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.30895568" y3="2.50822456" z3="-2.76434627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.39877014" y3="2.39639861" z3="-3.59404974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77744682" y3="3.45938762" z3="-2.69286159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.7288788" y3="3.26291864" z3="-4.1739805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58113889" y3="3.90566211" z3="-0.31270385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77854125" y3="5.06017398" z3="-0.07639024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9555191" y3="3.95803954" z3="0.05490449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50823471" y3="5.10549111" z3="0.57104735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57650598" y3="3.06889527" z3="-0.07004847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56672363" y3="5.11952113" z3="0.84622587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.38221063" y3="6.23716529" z3="0.44640934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71919119" y3="6.26611935" z3="0.7567977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.75543895" y3="7.11974502" z3="0.60803098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.17256175" y3="7.17538515" z3="1.16124708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.27684184" y3="-3.9852042" z3="-2.90846691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49683323" y3="-5.00994111" z3="-2.57043011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.11585537" y3="-3.65404469" z3="-3.55022505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.37450968" y3="-4.01236621" z3="-3.54018054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61570769" y3="-1.64553654" z3="-2.14276361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3357878" y3="-1.16175031" z3="-2.82666619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.44659008" y3="-0.98137495" z3="-1.27951404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.66180703" y3="-1.71000416" z3="-2.68848831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8949,-.9546,-.71;6.5385,-1.9547,-1.6464;6.0226,-1.0013,-1.4973;4.7245,1.4724,-1.1198;4.2699,.313,-.5157;2.6046,2.7388,-1.0954;3.9698,2.7335,-.8689;2.3807,5.0007,-.3145;1.7796,3.8588,-.7885;1.7689,5.8793,-.0867;2.0028,1.6146,-1.5816;3.1481,.3714,.2598;1.693,.382,-.5257;.6319,.7137,.457;1.6124,-.8581,-1.3879;1.1125,-2.501,-1.2451;2.3363,-5.5052,-6.1374;2.0079,-5.0746,-5.1872;1.1568,-3.9426,-2.7734;1.9698,-3.695,-5.0351;1.6454,-5.9054,-4.1238;1.2355,-5.3332,-2.9263;1.5527,-3.0968,-3.8348;2.258,-3.0243,-5.8483;1.6974,-6.9929,-4.2194;.9953,-5.9706,-2.0711;.6959,-3.3993,-1.5474;-.3267,-3.892,-.8402;-.6572,-4.8927,-1.1305;-.4163,-3.6047,.6083;-.5525,-3.1641,3.3692;-.7807,-4.6447,1.4734;-.1381,-2.3402,1.1367;-.2032,-2.1223,2.5088;-.8402,-4.4265,2.8482;-.977,-5.6437,1.0723;.1201,-1.4987,.4934;.0288,-1.1243,2.89;-1.091,-5.2549,3.5168;-.5926,-2.9971,4.4495;1.5128,-1.7614,-3.8043;1.5612,-1.3528,-2.8948;.3022,3.7327,-.8815;-2.0848,-3.0214,-1.7546;-2.9115,-3.1658,-.6366;-3.1175,-2.2694,.272;-3.8166,-.687,.4984;-4.4705,-.1121,-1.1502;-2.5296,.3913,1.2784;-5.2267,-1.0155,1.679;-3.4269,-4.3626,-.3973;-4.1831,-4.5686,.7869;-3.6887,.3076,-1.7975;-5.2227,.6811,-.9885;-4.9632,-.9359,-1.7034;-1.5916,.5053,.7022;-2.2583,-.0064,2.2735;-2.9701,1.3965,1.4189;-5.6908,-.0562,1.9776;-6.0162,-1.6367,1.2209;-4.8738,-1.523,2.5974;-5.1083,-3.9696,.7668;-3.5917,-4.3111,1.6794;-4.4337,-5.6378,.7919;4.2844,-2.1922,-.1576;4.1516,-3.3169,-.9852;3.5168,-4.4683,-.535;3.0126,-4.4885,.7594;3.16,-3.4062,1.6219;3.7927,-2.2606,1.1565;4.5037,-3.2743,-2.0192;3.3824,-5.3285,-1.1911;2.2622,-5.66,1.215;2.7528,-3.4606,2.6325;3.885,-1.3965,1.8152;-.4741,4.0003,.2528;-1.8511,3.8208,.2371;-2.4521,3.3854,-.9419;-1.7135,3.136,-2.0954;-.3338,3.3,-2.0535;.0199,4.3074,1.1798;-2.4573,3.9986,1.1286;-3.8957,3.1482,-.955;-2.2151,2.7964,-2.995;.263,3.0739,-2.9347;2.1423,-5.8302,2.4073;1.7843,-6.3894,.3652;-4.4368,3.0274,-2.0333;-4.472,3.0682,.1142;6.5237,.1505,-2.1569;5.8516,1.3974,-2.0015;7.658,.07,-3.0114;8.0926,1.1679,-3.7116;8.1715,-.8912,-3.1116;8.9619,1.0934,-4.3709;6.309,2.5082,-2.7643;7.3988,2.3964,-3.594;5.7774,3.4594,-2.6929;7.7289,3.2629,-4.174;4.5811,3.9057,-.3127;3.7785,5.0602,-.0764;5.9555,3.958,.0549;6.5082,5.1055,.571;6.5765,3.0689,-.07;7.5667,5.1195,.8462;4.3822,6.2372,.4464;5.7192,6.2661,.7568;3.7554,7.1197,.608;6.1726,7.1754,1.1612;-2.2768,-3.9852,-2.9085;-2.4968,-5.0099,-2.5704;-3.1159,-3.654,-3.5502;-1.3745,-4.0124,-3.5402;-1.6157,-1.6455,-2.1428;-2.3358,-1.1618,-2.8267;-1.4466,-.9814,-1.2795;-.6618,-1.71,-2.6885;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662586270619</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006784385924 0.001090647318 0.022983199223 0.005338059737</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053798616 -0.006175484 0.000171595 0.000237214 0.000336822 0.000346294 0.000372344 0.000429915 0.000534479 0.000646708 0.000764048 0.000817458 0.000951768 0.001085272 0.001240545 0.001250126 0.001274203 0.001377841 0.001488413 0.001582299 0.001765912 0.001999480 0.002209118 0.002462584 0.002931690 0.003111898 0.003619083 0.003657609 0.003671919 0.004357643 0.004591530 0.004818659 0.005033054 0.005288942 0.005834315 0.005837807 0.006513087 0.006792559 0.006933469 0.007440129 0.007798417 0.008379040 0.008794983 0.009190293 0.009433590 0.010138719 0.010412894 0.011513865 0.012564755 0.012948956 0.013062028 0.014121927 0.014420017 0.014705373 0.015096162 0.015479420 0.015662229 0.016286962 0.016707082 0.017281782 0.017584259 0.018042940 0.019093354 0.019979388 0.020461704 0.021957876 0.022564133 0.023008530 0.023221602 0.023654231 0.024729724 0.026009631 0.026401610 0.026693214 0.027626046 0.027808515 0.029960590 0.030437759 0.031803227 0.032424331 0.032705011 0.034619433 0.037571405 0.038659809 0.040509186 0.040844599 0.044052766 0.044402544 0.045232585 0.045571613 0.047070296 0.049669530 0.051035689 0.051460673 0.051638314 0.051813500 0.052279931 0.052362263 0.052579659 0.052731738 0.054053875 0.055370504 0.056493458 0.056868473 0.057139009 0.057739134 0.058426001 0.058617437 0.059224867 0.060616484 0.061036473 0.061553043 0.062466257 0.063562641 0.063955397 0.064501568 0.064663686 0.065915875 0.066198991 0.067997569 0.068577009 0.071205032 0.072243415 0.072724063 0.076476557 0.078667605 0.080091407 0.080827376 0.081990484 0.083460931 0.087085031 0.088550338 0.089545982 0.090907042 0.092852648 0.094067141 0.095279947 0.095591644 0.096264189 0.096685292 0.097762124 0.099581383 0.099789596 0.101090690 0.101324058 0.102865561 0.103253433 0.104078074 0.107095722 0.109099999 0.109421087 0.110492025 0.111681484 0.112267563 0.112857783 0.114590625 0.116459571 0.117020963 0.117599288 0.119787522 0.123183015 0.124229800 0.127090851 0.127289637 0.127950102 0.130276140 0.132455144 0.133689020 0.135731836 0.137052927 0.142262537 0.144490556 0.144658050 0.146062048 0.150750776 0.152882359 0.153977709 0.159681249 0.165716763 0.170668611 0.174564064 0.176665566 0.180675523 0.183279888 0.185999320 0.187700513 0.188777526 0.197013454 0.198870855 0.201855434 0.205353972 0.205799616 0.207144676 0.208980973 0.209104811 0.211420308 0.213147398 0.214752201 0.216708747 0.221221111 0.224900485 0.231539547 0.232735804 0.233985484 0.235363713 0.238542118 0.244946937 0.249421666 0.254792966 0.255411740 0.256868435 0.259156334 0.271381940 0.278342263 0.290794509 0.296883806 0.298700652 0.299873673 0.304644392 0.306473813 0.307552756 0.317791530 0.320906502 0.324065425 0.327656356 0.329308539 0.346659098 0.350929798 0.354992581 0.356557027 0.359304387 0.363880487 0.382666579 0.398356601 0.405975191 0.421497617 0.429782250 0.430584493 0.445486590 0.455911038 0.464326109 0.465507811 0.477886812 0.482796615 0.496352060 0.498042321 0.503850296 0.513291647 0.542843100 0.565448566 0.567039034 0.583338620 0.590335799 0.605110530 0.640472364 0.644396452 0.665530132 0.673071802 0.680548481 0.681946550 0.691825591 0.699092331 0.704242673 0.713556728 0.715016907 0.729701095 0.737286267 0.739018544 0.750696952 0.771580332 0.775857692 0.802917299 0.817231143 0.820091372 0.820823173 0.831490828 0.840408602 0.843174283 0.846528989 0.849861514 0.858334547 0.864393184 0.867341665 0.870115351 0.872609173 0.875042096 0.881183557 0.890491386 0.890854774 0.894061356 0.915593865 0.918100889 0.923932834 0.930915776 0.936241073 0.945511366 0.952005932 0.958813182 0.969315363 0.974072939 0.978530385 0.990901442 0.999942954 1.013353730 1.035062337 1.043781990 1.049730176 1.055283324 1.076029675 1.085130456 1.089721996 1.110092736 1.110735284 1.116367509 1.122458309 1.123414036 1.134497014 1.143888645 1.161250596 1.169633482 1.172862391 1.175092542 1.200523081 1.211915085 1.218844173 1.247308967 1.294884544 1.295799006 1.313604166 1.318933293 1.326299305 1.327153981 1.330140230 1.334523841 1.341042052 1.346052032 1.362387007 1.378784169 1.380898209 1.381369569 1.387402554 1.485363224 1.557507389 1.671863390 1.894895031</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">92</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89814985" y3="-0.95414374" z3="-0.71184672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54021065" y3="-1.95291808" z3="-1.65239164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02379254" y3="-0.99998478" z3="-1.50208475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72431352" y3="1.47263402" z3="-1.12192584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27231629" y3="0.31290884" z3="-0.51652389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.603298" y3="2.73637652" z3="-1.09370611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96878617" y3="2.73276706" z3="-0.86967161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3782832" y3="4.997942" z3="-0.31184405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77791693" y3="3.85572566" z3="-0.7856722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76592786" y3="5.87569028" z3="-0.08314092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00135616" y3="1.61147083" z3="-1.57822769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15212164" y3="0.37045587" z3="0.26126997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69548019" y3="0.37866308" z3="-0.5214782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63578704" y3="0.708863" z3="0.46334228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61488197" y3="-0.8618151" z3="-1.3831316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11431719" y3="-2.50503103" z3="-1.2409523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.34496407" y3="-5.51098327" z3="-6.13027825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.01473214" y3="-5.07979136" z3="-5.18093697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15956103" y3="-3.94642913" z3="-2.76948248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.9786499" y3="-3.70020456" z3="-5.02887895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64811968" y3="-5.91006181" z3="-4.11862977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23616413" y3="-5.3371748" z3="-2.92226583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.55958764" y3="-3.10123935" z3="-3.82974179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.27008937" y3="-3.02997268" z3="-5.84131508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6986094" y3="-6.99759164" z3="-4.21402815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99304018" y3="-5.9740734" z3="-2.06754722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69714886" y3="-3.40277936" z3="-1.54422815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32694338" y3="-3.89478182" z3="-0.83902551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66012262" y3="-4.89334463" z3="-1.132143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41881665" y3="-3.60941349" z3="0.60953614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5601416" y3="-3.17371137" z3="3.37086291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.78790386" y3="-4.64992978" z3="1.47174283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13842491" y3="-2.34635949" z3="1.14087814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.206276" y3="-2.13089517" z3="2.5132145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.84986945" y3="-4.43431545" z3="2.84687422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.98771923" y3="-5.64621547" z3="1.06784343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12189641" y3="-1.50327347" z3="0.4989689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02600501" y3="-1.13316065" z3="2.89650197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.10533251" y3="-5.26274019" z3="3.51284684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.60308133" y3="-3.00816131" z3="4.45132607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52224185" y3="-1.76585607" z3="-3.79936505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.56808377" y3="-1.35706208" z3="-2.88973346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30065174" y3="3.72753517" z3="-0.87609175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.0833615" y3="-3.01677629" z3="-1.75604493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91128869" y3="-3.16196664" z3="-0.63906474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11567474" y3="-2.26764119" z3="0.27149411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81141118" y3="-0.68357257" z3="0.50006836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.45930441" y3="-0.10598002" z3="-1.15672107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52318586" y3="0.39110717" z3="1.2862457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23392217" y3="-1.012176" z3="1.67667607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42911381" y3="-4.359306" z3="-0.40207242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.18979313" y3="-4.56413084" z3="0.77868638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.66567636" y3="0.32079704" z3="-1.79687528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22309266" y3="0.68215633" z3="-0.99810589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.94523025" y3="-0.9279203" z3="-1.70783886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58598306" y3="0.50191109" z3="0.71207365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25394612" y3="-0.00106769" z3="2.28024884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96484922" y3="1.39474039" z3="1.42594459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68839359" y3="-0.05131355" z3="1.97676495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02576699" y3="-1.62759827" z3="1.21269018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.8837563" y3="-1.52365588" z3="2.58980163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.1118902" y3="-3.96090864" z3="0.75810115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.60094319" y3="-4.3122578" z3="1.67345542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.44506238" y3="-5.63166865" z3="0.77978472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28912783" y3="-2.1917485" z3="-0.15788491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15472533" y3="-3.31674876" z3="-0.98449852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51867136" y3="-4.46702676" z3="-0.53321661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01459087" y3="-4.48557842" z3="0.76133083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16435079" y3="-3.40312048" z3="1.62318332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79865879" y3="-2.2589681" z3="1.15671882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50605508" y3="-3.27527905" z3="-2.01878673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3826074" y3="-5.32730431" z3="-1.18872767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26188513" y3="-5.65528916" z3="1.21766283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7574055" y3="-3.45617617" z3="2.63392503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89240344" y3="-1.39453666" z3="1.81478698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47510531" y3="3.99648647" z3="0.25930176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85301656" y3="3.82006127" z3="0.24177955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45038378" y3="3.37782959" z3="-0.92980923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.7127697" y3="3.12654134" z3="-2.08448352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3345421" y3="3.29227777" z3="-2.04708554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01785809" y3="4.30732524" z3="1.18266669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46057383" y3="4.00227574" z3="1.1277019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89862539" y3="3.15118655" z3="-0.95289631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.22568838" y3="2.80223968" z3="-2.99788008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.2586657" y3="3.07203599" z3="-2.94013544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13992745" y3="-5.82326398" z3="2.41006384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78429764" y3="-6.38540017" z3="0.36846864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44106726" y3="3.03271712" z3="-2.02876149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47438716" y3="3.0715827" z3="0.11524341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52199886" y3="0.15216934" z3="-2.16335131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84922877" y3="1.39852787" z3="-2.00640114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.65397924" y3="0.07249619" z3="-3.02097471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.08555551" y3="1.17060659" z3="-3.72275553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.16811387" y3="-0.8882273" z3="-3.12240837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.95299312" y3="1.09670284" z3="-4.38453811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.30337995" y3="2.50956698" z3="-2.77088255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.39092531" y3="2.39848912" z3="-3.60366516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77115492" y3="3.46024093" z3="-2.69821274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.71860742" y3="3.26510313" z3="-4.1848404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57976135" y3="3.90551808" z3="-0.31439993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77626277" y3="5.05883826" z3="-0.07570464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95473247" y3="3.95964444" z3="0.05020463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50692404" y3="5.10739993" z3="0.56611004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5767031" y3="3.07164967" z3="-0.07677627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56587402" y3="5.12277323" z3="0.83899142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37935153" y3="6.23614139" z3="0.44689042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71674976" y3="6.26668456" z3="0.75467172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.75185677" y3="7.11771034" z3="0.61046463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16969102" y3="7.17615255" z3="1.15902336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.2740408" y3="-3.97827791" z3="-2.91190528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49934768" y3="-5.00230059" z3="-2.57778551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.10911397" y3="-3.64225071" z3="-3.55528682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.3696041" y3="-4.00753124" z3="-3.54045354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.60981155" y3="-1.64169622" z3="-2.1398384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32789221" y3="-1.15349471" z3="-2.82313943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.43917777" y3="-0.98254599" z3="-1.27401904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.65347041" y3="-1.70793266" z3="-2.68395604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8981,-.9541,-.7118;6.5402,-1.9529,-1.6524;6.0238,-1,-1.5021;4.7243,1.4726,-1.1219;4.2723,.3129,-.5165;2.6033,2.7364,-1.0937;3.9688,2.7328,-.8697;2.3783,4.9979,-.3118;1.7779,3.8557,-.7857;1.7659,5.8757,-.0831;2.0014,1.6115,-1.5782;3.1521,.3705,.2613;1.6955,.3787,-.5215;.6358,.7089,.4633;1.6149,-.8618,-1.3831;1.1143,-2.505,-1.241;2.345,-5.511,-6.1303;2.0147,-5.0798,-5.1809;1.1596,-3.9464,-2.7695;1.9786,-3.7002,-5.0289;1.6481,-5.9101,-4.1186;1.2362,-5.3372,-2.9223;1.5596,-3.1012,-3.8297;2.2701,-3.03,-5.8413;1.6986,-6.9976,-4.214;.993,-5.9741,-2.0675;.6971,-3.4028,-1.5442;-.3269,-3.8948,-.839;-.6601,-4.8933,-1.1321;-.4188,-3.6094,.6095;-.5601,-3.1737,3.3709;-.7879,-4.6499,1.4717;-.1384,-2.3464,1.1409;-.2063,-2.1309,2.5132;-.8499,-4.4343,2.8469;-.9877,-5.6462,1.0678;.1219,-1.5033,.499;.026,-1.1332,2.8965;-1.1053,-5.2627,3.5128;-.6031,-3.0082,4.4513;1.5222,-1.7659,-3.7994;1.5681,-1.3571,-2.8897;.3007,3.7275,-.8761;-2.0834,-3.0168,-1.756;-2.9113,-3.162,-.6391;-3.1157,-2.2676,.2715;-3.8114,-.6836,.5001;-4.4593,-.106,-1.1567;-2.5232,.3911,1.2862;-5.2339,-1.0122,1.6767;-3.4291,-4.3593,-.4021;-4.1898,-4.5641,.7787;-3.6657,.3208,-1.7969;-5.2231,.6822,-.9981;-4.9452,-.9279,-1.7078;-1.586,.5019,.7121;-2.2539,-.0011,2.2802;-2.9648,1.3947,1.4259;-5.6884,-.0513,1.9768;-6.0258,-1.6276,1.2127;-4.8838,-1.5237,2.5898;-5.1119,-3.9609,.7581;-3.6009,-4.3123,1.6735;-4.4451,-5.6317,.7798;4.2891,-2.1917,-.1579;4.1547,-3.3167,-.9845;3.5187,-4.467,-.5332;3.0146,-4.4856,.7613;3.1644,-3.4031,1.6232;3.7987,-2.259,1.1567;4.5061,-3.2753,-2.0188;3.3826,-5.3273,-1.1887;2.2619,-5.6553,1.2177;2.7574,-3.4562,2.6339;3.8924,-1.3945,1.8148;-.4751,3.9965,.2593;-1.853,3.8201,.2418;-2.4504,3.3778,-.9298;-1.7128,3.1265,-2.0845;-.3345,3.2923,-2.0471;.0179,4.3073,1.1827;-2.4606,4.0023,1.1277;-3.8986,3.1512,-.9529;-2.2257,2.8022,-2.9979;.2587,3.072,-2.9401;2.1399,-5.8233,2.4101;1.7843,-6.3854,.3685;-4.4411,3.0327,-2.0288;-4.4744,3.0716,.1152;6.522,.1522,-2.1634;5.8492,1.3985,-2.0064;7.654,.0725,-3.021;8.0856,1.1706,-3.7228;8.1681,-.8882,-3.1224;8.953,1.0967,-4.3845;6.3034,2.5096,-2.7709;7.3909,2.3985,-3.6037;5.7712,3.4602,-2.6982;7.7186,3.2651,-4.1848;4.5798,3.9055,-.3144;3.7763,5.0588,-.0757;5.9547,3.9596,.0502;6.5069,5.1074,.5661;6.5767,3.0716,-.0768;7.5659,5.1228,.839;4.3794,6.2361,.4469;5.7167,6.2667,.7547;3.7519,7.1177,.6105;6.1697,7.1762,1.159;-2.274,-3.9783,-2.9119;-2.4993,-5.0023,-2.5778;-3.1091,-3.6423,-3.5553;-1.3696,-4.0075,-3.5405;-1.6098,-1.6417,-2.1398;-2.3279,-1.1535,-2.8231;-1.4392,-.9825,-1.274;-.6535,-1.7079,-2.684;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662571237375</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006252149372 0.001101023410 0.021736844392 0.005337379967</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053822225 -0.005999534 0.000170142 0.000235186 0.000336907 0.000346753 0.000372164 0.000432484 0.000532775 0.000646687 0.000762942 0.000816304 0.000951763 0.001085181 0.001240996 0.001250821 0.001274384 0.001377364 0.001494497 0.001582309 0.001766105 0.001999197 0.002209099 0.002475602 0.002936887 0.003119109 0.003618149 0.003659093 0.003676089 0.004357433 0.004591293 0.004835994 0.005070087 0.005395854 0.005834558 0.005859720 0.006512949 0.006794708 0.006955190 0.007443270 0.007800181 0.008378432 0.008909971 0.009191100 0.009433174 0.010149533 0.010412980 0.011512759 0.012634133 0.012957857 0.013092705 0.014137125 0.014423071 0.014705737 0.015110895 0.015482789 0.015663239 0.016291023 0.016739569 0.017294513 0.017584062 0.018054699 0.019094392 0.020031515 0.020465114 0.021983271 0.022563393 0.023174379 0.023496483 0.023662668 0.024729680 0.026009902 0.026411109 0.026697716 0.027696256 0.027844924 0.029961995 0.030437674 0.031858091 0.032424652 0.032705129 0.034642257 0.037871300 0.038663780 0.040508583 0.040962558 0.044153083 0.044411064 0.045238317 0.045692381 0.047388797 0.049669661 0.051326143 0.051548366 0.051813506 0.052267176 0.052316496 0.052519714 0.052632529 0.053091639 0.054063966 0.055395923 0.056493921 0.056870662 0.057139431 0.057741005 0.058532170 0.058618578 0.059225329 0.060616367 0.061187241 0.061572008 0.062518063 0.063557817 0.064004220 0.064566622 0.065017125 0.065921324 0.066203156 0.067996691 0.068579758 0.071219180 0.072294456 0.072730528 0.076494167 0.078712747 0.080415173 0.080825396 0.082064243 0.083465748 0.087126361 0.088563926 0.089545738 0.090917100 0.092854224 0.094067721 0.095291144 0.095672483 0.096594522 0.096986885 0.097820040 0.099692214 0.100530375 0.101163355 0.101323562 0.102865775 0.103475989 0.104110054 0.107139773 0.109382652 0.109592801 0.110544268 0.111681397 0.112487359 0.112966782 0.114641399 0.116459548 0.117072223 0.117666608 0.119765163 0.123220275 0.125536639 0.127099726 0.127295465 0.128116210 0.130279074 0.132740553 0.133820603 0.135759812 0.137059130 0.142271391 0.144533253 0.144726326 0.146065846 0.150905372 0.152918233 0.153972948 0.159777290 0.165718001 0.170668628 0.174565536 0.176666864 0.180678996 0.183288859 0.186002165 0.187701863 0.188777432 0.197017498 0.198954341 0.201855999 0.205354572 0.205837299 0.207147139 0.209074450 0.209882524 0.211428982 0.213147379 0.214774760 0.216763794 0.221222665 0.224900680 0.231540069 0.232740635 0.233992722 0.235368863 0.239324503 0.244963128 0.249464134 0.254794524 0.255413774 0.256878819 0.259206999 0.271382671 0.278360281 0.290827845 0.296906686 0.298774488 0.299915298 0.304694687 0.306497634 0.307552772 0.317802216 0.320915059 0.324192018 0.327658589 0.329360771 0.346687624 0.350948239 0.355035413 0.356731785 0.359307419 0.363882599 0.382682595 0.398496532 0.405977518 0.423217100 0.429831129 0.430592703 0.445518814 0.456924466 0.464399850 0.465630203 0.477886868 0.482798040 0.496626769 0.498042350 0.506159802 0.513292266 0.542861892 0.565449959 0.567098457 0.583339118 0.590389210 0.605140345 0.640472245 0.644461872 0.665538681 0.673121671 0.680708022 0.682081607 0.691826746 0.699109254 0.704242746 0.714905152 0.715443704 0.730238068 0.737286725 0.739116743 0.750698710 0.771581012 0.775858288 0.802944036 0.817241095 0.820091501 0.820827772 0.831490837 0.840408643 0.843177162 0.846566990 0.849866622 0.858361990 0.864398735 0.867347213 0.871334152 0.873561402 0.876781472 0.881412938 0.890624257 0.890854939 0.894384229 0.915873169 0.918217713 0.923936856 0.930917641 0.936275309 0.946138821 0.952022521 0.958814595 0.969438911 0.975274817 0.978610499 0.991988529 1.000209740 1.013403456 1.035553063 1.044439140 1.049885306 1.055283535 1.076058706 1.085340598 1.090061698 1.110097704 1.110751900 1.116368642 1.122468659 1.123435443 1.134498576 1.143888590 1.161253074 1.169764580 1.172892749 1.175581001 1.200532503 1.213476705 1.220094478 1.247309101 1.294888146 1.295812792 1.313616924 1.318975960 1.326299567 1.327155596 1.330140426 1.334523829 1.341042233 1.346053906 1.362396445 1.378784183 1.380901214 1.381376642 1.388328630 1.486095338 1.557507700 1.671863686 1.894958049</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">93</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90170556" y3="-0.95357253" z3="-0.71384764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54234823" y3="-1.95099071" z3="-1.65840485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02536163" y3="-0.99854207" z3="-1.5069718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72423229" y3="1.47274318" z3="-1.12462895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27492478" y3="0.31287447" z3="-0.51767404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60179261" y3="2.73379792" z3="-1.09251141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96776004" y3="2.73191961" z3="-0.87111376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37552053" y3="4.99466038" z3="-0.30877574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77571137" y3="3.8520869" z3="-0.78257829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76239033" y3="5.87154674" z3="-0.07826891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00004647" y3="1.60810634" z3="-1.57556787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15624727" y3="0.36975553" z3="0.2623899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69811244" y3="0.37524745" z3="-0.51753945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63968655" y3="0.70416002" z3="0.46898795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61796132" y3="-0.86582053" z3="-1.37823232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11677774" y3="-2.50948606" z3="-1.23629313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.35308827" y3="-5.5178545" z3="-6.12281467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.02137938" y3="-5.08601565" z3="-5.17430759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1627012" y3="-3.95081231" z3="-2.76498195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.98767453" y3="-3.70635203" z3="-5.0223984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.65054185" y3="-5.91554263" z3="-4.11286727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23690792" y3="-5.34174864" z3="-2.9175302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.56688146" y3="-3.10645572" z3="-3.8243375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.28233923" y3="-3.03668096" z3="-5.83411669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69913273" y3="-7.00317434" z3="-4.20804644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.99074482" y3="-5.97809844" z3="-2.06327413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69869445" y3="-3.40623947" z3="-1.54079181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32816797" y3="-3.89630332" z3="-0.83807956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6622948" y3="-4.89452416" z3="-1.13275775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42160309" y3="-3.61337348" z3="0.61081497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5679824" y3="-3.18286053" z3="3.37261104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.79575622" y3="-4.65434952" z3="1.47008062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13883046" y3="-2.35243832" z3="1.14528831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.20919198" y3="-2.13965892" z3="2.51794285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.86026561" y3="-4.44128346" z3="2.84540416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.99706007" y3="-5.64980725" z3="1.06384269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12587587" y3="-1.5093718" z3="0.5062441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0250786" y3="-1.14414206" z3="2.90414977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.11962891" y3="-5.27028564" z3="3.50912539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.61248718" y3="-3.01953563" z3="4.45332131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53226287" y3="-1.77101267" z3="-3.7941299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.57521424" y3="-1.36208835" z3="-2.88430755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29839103" y3="3.72409731" z3="-0.87273881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07951723" y3="-3.01406286" z3="-1.75567381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91015484" y3="-3.15957587" z3="-0.64050099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11409412" y3="-2.26695517" z3="0.27175386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81171134" y3="-0.68046102" z3="0.49568437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.45175277" y3="-0.09721473" z3="-1.15865994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52288153" y3="0.38986384" z3="1.28777869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23154109" y3="-1.00436409" z3="1.66800655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43257544" y3="-4.35474924" z3="-0.40859573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.19697705" y3="-4.56016373" z3="0.76997853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.66665652" y3="0.32929069" z3="-1.79656683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.20135581" y3="0.69020793" z3="-0.99549122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.93442233" y3="-0.92112602" z3="-1.72021135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.5786309" y3="0.50208341" z3="0.71975138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26207402" y3="-0.01100642" z3="2.28592349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95839217" y3="1.3956106" z3="1.42859558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69063644" y3="-0.04659379" z3="1.97220592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02160052" y3="-1.61885088" z3="1.20138125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.88479193" y3="-1.51566063" z3="2.58209686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.11734044" y3="-3.95383966" z3="0.74684254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.60952197" y3="-4.3095897" z3="1.66743697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.45510781" y3="-5.62796852" z3="0.76989761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29424399" y3="-2.19107121" z3="-0.1580327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1581269" y3="-3.31667212" z3="-0.98359762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52072476" y3="-4.46577542" z3="-0.53097008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01700451" y3="-4.48242799" z3="0.76375082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16916665" y3="-3.39956646" z3="1.624817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.80507684" y3="-2.25677067" z3="1.15715055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50861149" y3="-3.27640272" z3="-2.01822854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38268852" y3="-5.32626271" z3="-1.18583866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26167473" y3="-5.65009897" z3="1.22108909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76252133" y3="-3.45113607" z3="2.63574446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90042939" y3="-1.39180652" z3="1.81437678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47654236" y3="3.99289135" z3="0.26393231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85416168" y3="3.81776759" z3="0.24759779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45596957" y3="3.38223809" z3="-0.9308559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.71846373" y3="3.12963328" z3="-2.08491446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33913012" y3="3.29275725" z3="-2.04633636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.0163482" y3="4.30290087" z3="1.18851525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46195325" y3="4.00290574" z3="1.13319526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.9015526" y3="3.15307582" z3="-0.94714853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.22233696" y3="2.79312333" z3="-2.98644481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.25523362" y3="3.06829949" z3="-2.93308013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13775626" y3="-5.81569464" z3="2.41362461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78405709" y3="-6.38095355" z3="0.37256416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44526056" y3="3.0426919" z3="-2.02619171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47652927" y3="3.06800905" z3="0.12236736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52055207" y3="0.15392156" z3="-2.17006176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84695886" y3="1.39963263" z3="-2.01173544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.65000337" y3="0.07524152" z3="-3.03109592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.07813541" y3="1.17357606" z3="-3.7346845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1648626" y3="-0.88495134" z3="-3.1338256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.94351191" y3="1.10032598" z3="-4.39926732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.29762353" y3="2.51102936" z3="-2.7777026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.38265682" y3="2.40082302" z3="-3.6138521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.76455194" y3="3.46114528" z3="-2.70350818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.70756985" y3="3.26756087" z3="-4.19640694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57838056" y3="3.90512259" z3="-0.31635884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77383502" y3="5.05711956" z3="-0.07488798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95402015" y3="3.96087282" z3="0.04541363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50556598" y3="5.10885518" z3="0.56154013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57705746" y3="3.07396017" z3="-0.08391228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56508417" y3="5.12551833" z3="0.83212404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37610644" y3="6.23462432" z3="0.44820912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71408583" y3="6.26671943" z3="0.75334721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74759279" y3="7.11503953" z3="0.61434305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16642757" y3="7.1763067" z3="1.15811985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.27127223" y3="-3.97048952" z3="-2.91488811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50262449" y3="-4.99433138" z3="-2.58438356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.10225366" y3="-3.62861355" z3="-3.56017113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.36488195" y3="-4.00201479" z3="-3.54059914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.60234869" y3="-1.63880512" z3="-2.13673599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3195498" y3="-1.1468959" z3="-2.81817294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.43017012" y3="-0.9798298" z3="-1.2693559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.64906494" y3="-1.70590002" z3="-2.68256442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9017,-.9536,-.7138;6.5423,-1.951,-1.6584;6.0254,-.9985,-1.507;4.7242,1.4727,-1.1246;4.2749,.3129,-.5177;2.6018,2.7338,-1.0925;3.9678,2.7319,-.8711;2.3755,4.9947,-.3088;1.7757,3.8521,-.7826;1.7624,5.8715,-.0783;2,1.6081,-1.5756;3.1562,.3698,.2624;1.6981,.3752,-.5175;.6397,.7042,.469;1.618,-.8658,-1.3782;1.1168,-2.5095,-1.2363;2.3531,-5.5179,-6.1228;2.0214,-5.086,-5.1743;1.1627,-3.9508,-2.765;1.9877,-3.7064,-5.0224;1.6505,-5.9155,-4.1129;1.2369,-5.3417,-2.9175;1.5669,-3.1065,-3.8243;2.2823,-3.0367,-5.8341;1.6991,-7.0032,-4.208;.9907,-5.9781,-2.0633;.6987,-3.4062,-1.5408;-.3282,-3.8963,-.8381;-.6623,-4.8945,-1.1328;-.4216,-3.6134,.6108;-.568,-3.1829,3.3726;-.7958,-4.6543,1.4701;-.1388,-2.3524,1.1453;-.2092,-2.1397,2.5179;-.8603,-4.4413,2.8454;-.9971,-5.6498,1.0638;.1259,-1.5094,.5062;.0251,-1.1441,2.9041;-1.1196,-5.2703,3.5091;-.6125,-3.0195,4.4533;1.5323,-1.771,-3.7941;1.5752,-1.3621,-2.8843;.2984,3.7241,-.8727;-2.0795,-3.0141,-1.7557;-2.9102,-3.1596,-.6405;-3.1141,-2.267,.2718;-3.8117,-.6805,.4957;-4.4518,-.0972,-1.1587;-2.5229,.3899,1.2878;-5.2315,-1.0044,1.668;-3.4326,-4.3547,-.4086;-4.197,-4.5602,.77;-3.6667,.3293,-1.7966;-5.2014,.6902,-.9955;-4.9344,-.9211,-1.7202;-1.5786,.5021,.7198;-2.2621,-.011,2.2859;-2.9584,1.3956,1.4286;-5.6906,-.0466,1.9722;-6.0216,-1.6189,1.2014;-4.8848,-1.5157,2.5821;-5.1173,-3.9538,.7468;-3.6095,-4.3096,1.6674;-4.4551,-5.628,.7699;4.2942,-2.1911,-.158;4.1581,-3.3167,-.9836;3.5207,-4.4658,-.531;3.017,-4.4824,.7638;3.1692,-3.3996,1.6248;3.8051,-2.2568,1.1572;4.5086,-3.2764,-2.0182;3.3827,-5.3263,-1.1858;2.2617,-5.6501,1.2211;2.7625,-3.4511,2.6357;3.9004,-1.3918,1.8144;-.4765,3.9929,.2639;-1.8542,3.8178,.2476;-2.456,3.3822,-.9309;-1.7185,3.1296,-2.0849;-.3391,3.2928,-2.0463;.0163,4.3029,1.1885;-2.462,4.0029,1.1332;-3.9016,3.1531,-.9471;-2.2223,2.7931,-2.9864;.2552,3.0683,-2.9331;2.1378,-5.8157,2.4136;1.7841,-6.381,.3726;-4.4453,3.0427,-2.0262;-4.4765,3.068,.1224;6.5206,.1539,-2.1701;5.847,1.3996,-2.0117;7.65,.0752,-3.0311;8.0781,1.1736,-3.7347;8.1649,-.885,-3.1338;8.9435,1.1003,-4.3993;6.2976,2.511,-2.7777;7.3827,2.4008,-3.6139;5.7646,3.4611,-2.7035;7.7076,3.2676,-4.1964;4.5784,3.9051,-.3164;3.7738,5.0571,-.0749;5.954,3.9609,.0454;6.5056,5.1089,.5615;6.5771,3.074,-.0839;7.5651,5.1255,.8321;4.3761,6.2346,.4482;5.7141,6.2667,.7533;3.7476,7.115,.6143;6.1664,7.1763,1.1581;-2.2713,-3.9705,-2.9149;-2.5026,-4.9943,-2.5844;-3.1023,-3.6286,-3.5602;-1.3649,-4.002,-3.5406;-1.6023,-1.6388,-2.1367;-2.3195,-1.1469,-2.8182;-1.4302,-.9798,-1.2694;-.6491,-1.7059,-2.6826;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662570219138</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006188380186 0.001052492426 0.017387639484 0.005337361638</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053845017 -0.005412520 0.000167690 0.000237998 0.000337147 0.000348648 0.000371866 0.000435251 0.000532146 0.000647100 0.000762887 0.000817092 0.000952263 0.001085334 0.001241457 0.001250924 0.001274518 0.001378559 0.001505304 0.001607046 0.001766614 0.002000907 0.002217260 0.002544032 0.002940559 0.003141820 0.003621207 0.003675821 0.003690970 0.004358544 0.004595717 0.004841407 0.005070912 0.005393466 0.005834621 0.005864409 0.006514062 0.006794952 0.006960547 0.007443449 0.007801151 0.008383044 0.009005177 0.009191366 0.009433027 0.010164260 0.010415868 0.011521491 0.012641507 0.012959391 0.013108131 0.014148739 0.014427469 0.014705875 0.015136561 0.015482143 0.015665521 0.016307140 0.017049524 0.017293644 0.017595046 0.018061416 0.019126239 0.020058671 0.020465688 0.021982177 0.022569326 0.023201531 0.023621983 0.023795170 0.024731153 0.026011934 0.026433037 0.026704346 0.027731309 0.027912334 0.029961824 0.030437573 0.031857106 0.032424680 0.032711764 0.034644057 0.038080962 0.038663147 0.040540135 0.040978405 0.044162767 0.044560193 0.045238269 0.045688982 0.047394430 0.049669667 0.051340747 0.051555338 0.051813698 0.052272344 0.052326228 0.052550767 0.052638367 0.054051783 0.054323341 0.055399929 0.056493899 0.056870818 0.057139612 0.057740810 0.058609599 0.058881341 0.059230606 0.060630989 0.061230851 0.061619302 0.062525598 0.063699933 0.064116255 0.064575906 0.065543480 0.066036084 0.066273268 0.068008981 0.068579658 0.071247285 0.072303862 0.072729310 0.076497028 0.078720650 0.080558464 0.080829394 0.082133299 0.083537136 0.087136344 0.088563960 0.089547861 0.090939673 0.092858834 0.094083358 0.095298346 0.095713655 0.096630273 0.097409859 0.097899412 0.099704063 0.100902664 0.101322265 0.101420177 0.102866149 0.103725846 0.104154932 0.107150761 0.109401356 0.109830445 0.110763024 0.111681650 0.112637787 0.113127078 0.114656169 0.116461316 0.117178886 0.117672859 0.119979573 0.123232033 0.126696201 0.127109402 0.127326763 0.128494330 0.130280393 0.132998915 0.134173025 0.135825547 0.137071397 0.142270457 0.144553894 0.144906327 0.146065673 0.150899910 0.152914913 0.153978578 0.159786683 0.165721577 0.170668814 0.174565998 0.176666917 0.180680393 0.183297336 0.186005121 0.187701796 0.188780076 0.197017791 0.199020670 0.201856374 0.205354805 0.205858990 0.207148155 0.209075900 0.210379793 0.211447661 0.213148875 0.214897225 0.216817123 0.221236567 0.224902159 0.231540070 0.232741248 0.233995644 0.235373508 0.239407375 0.244972804 0.249471270 0.254795807 0.255413490 0.256897100 0.259302757 0.271382752 0.278378821 0.290857236 0.296911321 0.298839021 0.300007037 0.304828763 0.306535170 0.307552768 0.317826289 0.320925697 0.324320451 0.327674148 0.329399951 0.346728307 0.350966842 0.355062979 0.357028674 0.359310097 0.363882889 0.382703676 0.398497057 0.405977772 0.425401142 0.429839256 0.430608769 0.445520176 0.457706931 0.464410306 0.465762874 0.477886906 0.482818023 0.496795380 0.498042748 0.506588142 0.513322933 0.542862691 0.565450061 0.567117079 0.583339160 0.590443267 0.605146397 0.640577876 0.644545077 0.665540157 0.673275165 0.680870608 0.682309383 0.691832658 0.699135687 0.704242753 0.714934114 0.716440616 0.731559562 0.737311818 0.739126958 0.750700511 0.771581757 0.775858817 0.802965403 0.817248843 0.820096159 0.820838060 0.831500172 0.840409315 0.843215826 0.846613719 0.849878559 0.858399855 0.864429784 0.867347972 0.871838243 0.874164309 0.879953343 0.881784396 0.890850646 0.891094200 0.894975118 0.915941336 0.918323128 0.923944808 0.930933296 0.936279443 0.947586761 0.952022828 0.958818793 0.969500632 0.976564206 0.978803884 0.993542156 1.000684609 1.013476046 1.036098002 1.045265492 1.050162619 1.055283612 1.076092367 1.085559060 1.090517734 1.110098828 1.110756704 1.116368627 1.122473489 1.123445518 1.134499637 1.143890588 1.161253157 1.169799568 1.172900602 1.175741643 1.200535259 1.213984367 1.220432141 1.247309029 1.294939151 1.295820539 1.313622196 1.318976881 1.326300034 1.327156846 1.330140570 1.334524150 1.341044645 1.346054672 1.362401079 1.378784853 1.380902675 1.381380239 1.388903451 1.486780189 1.557507796 1.671863734 1.895354966</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">94</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90544964" y3="-0.95296" z3="-0.71613645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54458875" y3="-1.94898266" z3="-1.66488298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02698872" y3="-0.99703082" z3="-1.51237323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72402962" y3="1.47305386" z3="-1.12737853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27772993" y3="0.31290262" z3="-0.51885433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59996707" y3="2.73168773" z3="-1.09011861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96651998" y3="2.73139464" z3="-0.87182459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37269172" y3="4.99158123" z3="-0.3041324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7730199" y3="3.84892628" z3="-0.77811007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75913929" y3="5.86770773" z3="-0.07205555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99936735" y3="1.60496813" z3="-1.57214526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16073004" y3="0.36885608" z3="0.26378932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70114747" y3="0.3717707" z3="-0.51339622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64397949" y3="0.69942298" z3="0.47484796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62139034" y3="-0.8697594" z3="-1.37353927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11941799" y3="-2.51355071" z3="-1.23198967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.35993953" y3="-5.52554091" z3="-6.11558843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.02716394" y3="-5.09279302" z3="-5.16783741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16562422" y3="-3.95529222" z3="-2.76058351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.99608431" y3="-3.71300724" z3="-5.01623137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.65228309" y3="-5.9213578" z3="-4.10703628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23728013" y3="-5.34644319" z3="-2.9126707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57388817" y3="-3.11196227" z3="-3.81917013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.29397684" y3="-3.04414208" z3="-5.82747201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69872685" y3="-7.00912121" z3="-4.20195106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98820824" y3="-5.98209662" z3="-2.05873851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70020697" y3="-3.40954201" z3="-1.53733411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32830586" y3="-3.89814267" z3="-0.83665261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66542889" y3="-4.89436583" z3="-1.13376259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42488406" y3="-3.61677601" z3="0.61227097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.57602042" y3="-3.19182883" z3="3.37456903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.80427709" y3="-4.6584861" z3="1.46846582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13841465" y3="-2.3583294" z3="1.15017143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21117676" y3="-2.14845175" z3="2.52315796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.8713083" y3="-4.44815067" z3="2.84402384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.00650755" y3="-5.65288367" z3="1.05976574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13194306" y3="-1.5153962" z3="0.51375839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02682276" y3="-1.15542542" z3="2.91258319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.13394099" y3="-5.27796498" z3="3.50572825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.62188982" y3="-3.03089852" z3="4.4555378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54221758" y3="-1.77647288" z3="-3.78911457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5832639" y3="-1.36747222" z3="-2.87943801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29568229" y3="3.7213433" z3="-0.86791547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07792567" y3="-3.00829303" z3="-1.75805118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91080461" y3="-3.15420171" z3="-0.64547836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11515336" y3="-2.26137928" z3="0.26723467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80612436" y3="-0.67551518" z3="0.4946233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.44422385" y3="-0.0954878" z3="-1.15967154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51939431" y3="0.39115486" z3="1.28979462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23061051" y3="-0.99874748" z3="1.66220501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43591492" y3="-4.34937552" z3="-0.4154098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.20364332" y3="-4.55517336" z3="0.76100585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.64926888" y3="0.33825202" z3="-1.79168545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21446647" y3="0.68964912" z3="-1.00591906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.92108072" y3="-0.91687264" z3="-1.72052335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.57814644" y3="0.49838361" z3="0.72159046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25888766" y3="-0.00648056" z3="2.28379218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95564838" y3="1.398482" z3="1.42823666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68739162" y3="-0.03761985" z3="1.96412712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02165539" y3="-1.6091636" z3="1.19212367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.88949086" y3="-1.51480924" z3="2.57928827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12290667" y3="-3.94716569" z3="0.7371328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.61760782" y3="-4.30896121" z3="1.65994016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.46467311" y3="-5.62181675" z3="0.75732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29970706" y3="-2.19041973" z3="-0.15828714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16157007" y3="-3.31660017" z3="-0.98272369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52273805" y3="-4.46441671" z3="-0.52864855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01962592" y3="-4.47908565" z3="0.76634905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17474874" y3="-3.39602072" z3="1.62660984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81222031" y3="-2.25466133" z3="1.15760209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51102226" y3="-3.27763583" z3="-2.01777214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38243345" y3="-5.32505546" z3="-1.1828913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26150033" y3="-5.64457736" z3="1.22492662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76887126" y3="-3.44620832" z3="2.63789062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90941941" y3="-1.38929221" z3="1.81401477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47984791" y3="3.99513949" z3="0.26486879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85784204" y3="3.82101074" z3="0.24918068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45698149" y3="3.38096084" z3="-0.92376384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.71936426" y3="3.12490643" z3="-2.07717653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33986955" y3="3.2843905" z3="-2.03698155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01451362" y3="4.30336868" z3="1.19030302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46312447" y3="4.00248848" z3="1.14045704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90424435" y3="3.15598056" z3="-0.9430357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23198953" y3="2.79864905" z3="-2.98802979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.25526042" y3="3.05724748" z3="-2.9220564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13534622" y3="-5.80735395" z3="2.41758743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78402778" y3="-6.3764788" z3="0.37720334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44774203" y3="3.04688787" z3="-2.01958273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47864573" y3="3.06833376" z3="0.12654168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5189804" y3="0.15577199" z3="-2.17739395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84447852" y3="1.40084965" z3="-2.01751517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.64587752" y3="0.07812272" z3="-3.04189148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.07053688" y3="1.17671505" z3="-3.74719502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.16156292" y3="-0.88148728" z3="-3.14594997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.93380798" y3="1.10417259" z3="-4.41456769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.29173044" y3="2.51259007" z3="-2.78493242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.37422786" y3="2.40331468" z3="-3.62446001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75789318" y3="3.46216154" z3="-2.70909374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.69642079" y3="3.27024985" z3="-4.20820552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57699645" y3="3.90480175" z3="-0.31743675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77133876" y3="5.05535737" z3="-0.07259313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95360193" y3="3.96186233" z3="0.04093501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50471819" y3="5.10982233" z3="0.5576953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5776491" y3="3.07596394" z3="-0.09144797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56496313" y3="5.12752539" z3="0.82573177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37317453" y3="6.23282683" z3="0.45117307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71187517" y3="6.26620336" z3="0.75343879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7436686" y3="7.11202711" z3="0.62025581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16382103" y3="7.17570095" z3="1.15894894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.2681136" y3="-3.96421493" z3="-2.91899823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50317367" y3="-4.98827236" z3="-2.58846584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.09664724" y3="-3.61985387" z3="-3.56764151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.35985867" y3="-3.99804364" z3="-3.54186629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.5958451" y3="-1.63390734" z3="-2.134533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31091756" y3="-1.13755011" z3="-2.81520388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.42072715" y3="-0.97976779" z3="-1.26552059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.64102652" y3="-1.70368002" z3="-2.67980321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9054,-.953,-.7161;6.5446,-1.949,-1.6649;6.027,-.997,-1.5124;4.724,1.4731,-1.1274;4.2777,.3129,-.5189;2.6,2.7317,-1.0901;3.9665,2.7314,-.8718;2.3727,4.9916,-.3041;1.773,3.8489,-.7781;1.7591,5.8677,-.0721;1.9994,1.605,-1.5721;3.1607,.3689,.2638;1.7011,.3718,-.5134;.644,.6994,.4748;1.6214,-.8698,-1.3735;1.1194,-2.5136,-1.232;2.3599,-5.5255,-6.1156;2.0272,-5.0928,-5.1678;1.1656,-3.9553,-2.7606;1.9961,-3.713,-5.0162;1.6523,-5.9214,-4.107;1.2373,-5.3464,-2.9127;1.5739,-3.112,-3.8192;2.294,-3.0441,-5.8275;1.6987,-7.0091,-4.202;.9882,-5.9821,-2.0587;.7002,-3.4095,-1.5373;-.3283,-3.8981,-.8367;-.6654,-4.8944,-1.1338;-.4249,-3.6168,.6123;-.576,-3.1918,3.3746;-.8043,-4.6585,1.4685;-.1384,-2.3583,1.1502;-.2112,-2.1485,2.5232;-.8713,-4.4482,2.844;-1.0065,-5.6529,1.0598;.1319,-1.5154,.5138;.0268,-1.1554,2.9126;-1.1339,-5.278,3.5057;-.6219,-3.0309,4.4555;1.5422,-1.7765,-3.7891;1.5833,-1.3675,-2.8794;.2957,3.7213,-.8679;-2.0779,-3.0083,-1.7581;-2.9108,-3.1542,-.6455;-3.1152,-2.2614,.2672;-3.8061,-.6755,.4946;-4.4442,-.0955,-1.1597;-2.5194,.3912,1.2898;-5.2306,-.9987,1.6622;-3.4359,-4.3494,-.4154;-4.2036,-4.5552,.761;-3.6493,.3383,-1.7917;-5.2145,.6896,-1.0059;-4.9211,-.9169,-1.7205;-1.5781,.4984,.7216;-2.2589,-.0065,2.2838;-2.9556,1.3985,1.4282;-5.6874,-.0376,1.9641;-6.0217,-1.6092,1.1921;-4.8895,-1.5148,2.5793;-5.1229,-3.9472,.7371;-3.6176,-4.309,1.6599;-4.4647,-5.6218,.7573;4.2997,-2.1904,-.1583;4.1616,-3.3166,-.9827;3.5227,-4.4644,-.5286;3.0196,-4.4791,.7663;3.1747,-3.396,1.6266;3.8122,-2.2547,1.1576;4.511,-3.2776,-2.0178;3.3824,-5.3251,-1.1829;2.2615,-5.6446,1.2249;2.7689,-3.4462,2.6379;3.9094,-1.3893,1.814;-.4798,3.9951,.2649;-1.8578,3.821,.2492;-2.457,3.381,-.9238;-1.7194,3.1249,-2.0772;-.3399,3.2844,-2.037;.0145,4.3034,1.1903;-2.4631,4.0025,1.1405;-3.9042,3.156,-.943;-2.232,2.7986,-2.988;.2553,3.0572,-2.9221;2.1353,-5.8074,2.4176;1.784,-6.3765,.3772;-4.4477,3.0469,-2.0196;-4.4786,3.0683,.1265;6.519,.1558,-2.1774;5.8445,1.4008,-2.0175;7.6459,.0781,-3.0419;8.0705,1.1767,-3.7472;8.1616,-.8815,-3.1459;8.9338,1.1042,-4.4146;6.2917,2.5126,-2.7849;7.3742,2.4033,-3.6245;5.7579,3.4622,-2.7091;7.6964,3.2702,-4.2082;4.577,3.9048,-.3174;3.7713,5.0554,-.0726;5.9536,3.9619,.0409;6.5047,5.1098,.5577;6.5776,3.076,-.0914;7.565,5.1275,.8257;4.3732,6.2328,.4512;5.7119,6.2662,.7534;3.7437,7.112,.6203;6.1638,7.1757,1.1589;-2.2681,-3.9642,-2.919;-2.5032,-4.9883,-2.5885;-3.0966,-3.6199,-3.5676;-1.3599,-3.998,-3.5419;-1.5958,-1.6339,-2.1345;-2.3109,-1.1376,-2.8152;-1.4207,-.9798,-1.2655;-.641,-1.7037,-2.6798;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662569587288</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005377221998 0.000953600829 0.016923542615 0.005337914731</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053890841 -0.004368870 0.000165339 0.000231908 0.000339265 0.000347049 0.000372018 0.000431933 0.000536892 0.000647525 0.000766368 0.000817331 0.000952500 0.001088188 0.001242582 0.001252598 0.001274346 0.001387697 0.001505219 0.001637763 0.001771267 0.002001300 0.002221533 0.002572951 0.002953763 0.003188003 0.003623431 0.003678914 0.003751475 0.004359887 0.004594393 0.004857939 0.005072282 0.005447922 0.005834662 0.005874490 0.006513682 0.006798445 0.006963364 0.007443957 0.007801036 0.008383043 0.009007880 0.009192371 0.009433176 0.010162709 0.010416662 0.011528183 0.012646696 0.012959355 0.013110000 0.014147811 0.014428026 0.014706188 0.015149402 0.015485276 0.015667995 0.016313270 0.017230392 0.017455269 0.017700016 0.018067662 0.019241232 0.020064110 0.020487794 0.021995066 0.022580357 0.023218306 0.023619295 0.023861851 0.024741768 0.026016175 0.026452003 0.026709165 0.027744042 0.027960980 0.029963657 0.030437504 0.031858842 0.032424709 0.032719377 0.034688533 0.038129919 0.038665331 0.040600047 0.040978507 0.044163121 0.044768126 0.045245837 0.045711678 0.047423197 0.049669690 0.051342912 0.051556345 0.051814576 0.052272213 0.052326065 0.052551044 0.052641100 0.054064206 0.054473218 0.055401783 0.056493948 0.056871447 0.057139732 0.057742050 0.058609376 0.059182145 0.059316243 0.060654106 0.061227519 0.061626726 0.062533208 0.063873784 0.064333549 0.064579049 0.065624583 0.066136526 0.067163603 0.068077249 0.068582263 0.071243879 0.072304101 0.072733137 0.076496937 0.078725034 0.080601782 0.080833964 0.082149546 0.083598930 0.087140651 0.088571836 0.089555113 0.090983744 0.092862783 0.094111470 0.095305129 0.095734577 0.096645100 0.097608912 0.098124356 0.099716167 0.101053360 0.101321846 0.101740957 0.102867720 0.103925848 0.104261815 0.107153049 0.109400996 0.109883437 0.111052814 0.111687788 0.112757449 0.113241930 0.114656553 0.116464535 0.117262307 0.117678512 0.120392742 0.123254069 0.127074484 0.127209721 0.127515433 0.128941753 0.130285620 0.133062861 0.134547136 0.135855757 0.137094401 0.142284389 0.144560905 0.145114450 0.146078100 0.150948373 0.152916457 0.153982142 0.159786828 0.165721435 0.170672274 0.174568744 0.176675087 0.180682477 0.183303615 0.186009839 0.187706322 0.188801293 0.197018396 0.199077164 0.201856285 0.205356164 0.205872875 0.207148648 0.209076050 0.210687199 0.211479626 0.213151690 0.215301699 0.216876510 0.221285459 0.224905924 0.231540702 0.232742625 0.233995449 0.235376009 0.239429845 0.244974444 0.249478208 0.254801854 0.255421530 0.256922076 0.259389864 0.271382788 0.278378749 0.290880101 0.296911915 0.298856481 0.300153479 0.305072799 0.306554812 0.307553039 0.317836286 0.320938495 0.324408143 0.327679967 0.329404263 0.346764461 0.350979177 0.355071081 0.357168477 0.359312434 0.363883085 0.382719649 0.398526727 0.405978331 0.426294278 0.429839311 0.430672610 0.445601034 0.458122382 0.464423359 0.465855489 0.477886908 0.482965732 0.496873634 0.498043244 0.506600745 0.513446917 0.542874908 0.565454151 0.567117337 0.583339153 0.590444527 0.605146580 0.640649391 0.644592765 0.665543316 0.673428006 0.681241712 0.684227242 0.691846716 0.699149798 0.704242893 0.714935477 0.717086003 0.732838257 0.737418989 0.739414037 0.750702577 0.771582439 0.775866326 0.802980693 0.817253183 0.820114130 0.820865415 0.831543927 0.840410879 0.843284597 0.846644003 0.849896573 0.858423885 0.864472627 0.867347970 0.872036705 0.874373634 0.881031200 0.883141135 0.890850805 0.891581569 0.895754465 0.915956632 0.918336978 0.923961274 0.930963588 0.936284808 0.948666544 0.952022967 0.958823626 0.969533911 0.977434686 0.979268476 0.995244252 1.001515061 1.013570315 1.036650183 1.046140346 1.050738234 1.055284147 1.076121939 1.085823643 1.091315578 1.110101427 1.110759866 1.116369446 1.122474142 1.123446233 1.134500207 1.143894217 1.161260353 1.169803192 1.172902840 1.175757052 1.200535305 1.214076097 1.220430199 1.247309161 1.295009590 1.295825508 1.313627950 1.318986091 1.326300150 1.327157252 1.330140715 1.334527597 1.341044651 1.346062022 1.362406974 1.378784853 1.380902823 1.381382598 1.388996735 1.486828292 1.557508423 1.671863887 1.895799176</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">95</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91018992" y3="-0.95219888" z3="-0.71826967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54778652" y3="-1.94662504" z3="-1.67140126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02957345" y3="-0.99520561" z3="-1.51757398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72478489" y3="1.47343033" z3="-1.12973246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28133996" y3="0.31294486" z3="-0.51995885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59937599" y3="2.72881108" z3="-1.08870851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96614481" y3="2.73057576" z3="-0.87269591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37021109" y3="4.98785423" z3="-0.30087222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7717636" y3="3.84475158" z3="-0.7751518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75576953" y3="5.86291224" z3="-0.06728616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99874463" y3="1.60145203" z3="-1.56948388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16575435" y3="0.36782799" z3="0.2647345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70479147" y3="0.36773675" z3="-0.50989096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64850572" y3="0.69338131" z3="0.48005582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62574137" y3="-0.87410828" z3="-1.36961009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12117701" y3="-2.51778961" z3="-1.22799181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.36349226" y3="-5.5339425" z3="-6.10889873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.03026527" y3="-5.10010203" z3="-5.16182284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16735517" y3="-3.95976008" z3="-2.75635467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.00249555" y3="-3.72021259" z3="-5.01055885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.65159299" y3="-5.92742205" z3="-4.10144878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23600811" y3="-5.35111211" z3="-2.90799481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57981467" y3="-3.11778772" z3="-3.81439076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.30348871" y3="-3.05234627" z3="-5.82145707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69565537" y3="-7.01533141" z3="-4.19590933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98421438" y3="-5.98584568" z3="-2.05420814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70084442" y3="-3.41289708" z3="-1.53415675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33133791" y3="-3.89884435" z3="-0.83597632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66992009" y3="-4.89402409" z3="-1.13499778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42809013" y3="-3.62075523" z3="0.61363878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.5817376" y3="-3.20101799" z3="3.37681289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.8114787" y3="-4.66328855" z3="1.46736009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13891992" y3="-2.36356836" z3="1.15436795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21342025" y3="-2.1561579" z3="2.52774065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.87959167" y3="-4.45582885" z3="2.8433745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.01756333" y3="-5.65530723" z3="1.05603407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13331724" y3="-1.51882291" z3="0.5195911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02522895" y3="-1.16293641" z3="2.91903257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.14619139" y3="-5.28601506" z3="3.50292054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.62943498" y3="-3.04179972" z3="4.45802347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55202102" y3="-1.78220493" z3="-3.78473893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.59100881" y3="-1.37294076" z3="-2.87495987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29455865" y3="3.715176" z3="-0.86292431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07376149" y3="-3.00410573" z3="-1.75868989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91048165" y3="-3.14976973" z3="-0.64799729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11407101" y3="-2.26015313" z3="0.26709774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80413167" y3="-0.67284425" z3="0.49420546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.43632266" y3="-0.08687799" z3="-1.16469872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51589838" y3="0.39186121" z3="1.29308834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23605036" y3="-0.99518237" z3="1.65907899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43939637" y3="-4.34385549" z3="-0.42296865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.21113808" y3="-4.55060008" z3="0.75034581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.64485735" y3="0.34706244" z3="-1.7938208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19754293" y3="0.69355838" z3="-1.00530694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.90768961" y3="-0.91183078" z3="-1.73173154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.57011529" y3="0.49852552" z3="0.72901659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26102942" y3="-0.00779164" z3="2.29122611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95030914" y3="1.39794786" z3="1.43260227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68455594" y3="-0.03278535" z3="1.96354704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02960165" y3="-1.60056673" z3="1.18565105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89648369" y3="-1.51484365" z3="2.57036585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12717707" y3="-3.93829355" z3="0.72729661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.62662835" y3="-4.31108626" z3="1.65155861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.47688429" y3="-5.61566069" z3="0.74143926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.30619845" y3="-2.18957522" z3="-0.15840723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16483421" y3="-3.3157697" z3="-0.98200831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52417633" y3="-4.46198092" z3="-0.52644766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02267178" y3="-4.47497328" z3="0.76917778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1820143" y3="-3.39222702" z3="1.62892115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82141286" y3="-2.25263145" z3="1.1585256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51260741" y3="-3.27785298" z3="-2.01765424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38057257" y3="-5.322281" z3="-1.18029131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26175939" y3="-5.63815942" z3="1.22925227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77782021" y3="-3.44128307" z3="2.64089764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.9216304" y3="-1.38736459" z3="1.81443769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48053059" y3="3.98881735" z3="0.27294928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85859896" y3="3.81723901" z3="0.25535821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46031882" y3="3.37915244" z3="-0.92065575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72314689" y3="3.12152738" z3="-2.07387634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34345616" y3="3.28044968" z3="-2.03467928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01148337" y3="4.30433089" z3="1.19372861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46749601" y3="4.0083253" z3="1.13636145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.9081217" y3="3.15783437" z3="-0.94052937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.22748117" y3="2.78587543" z3="-2.97631481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24988455" y3="3.0533279" z3="-2.92429777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13328038" y3="-5.79776525" z3="2.42213976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78465712" y3="-6.37145697" z3="0.38256774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45307477" y3="3.0541753" z3="-2.01842699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48252189" y3="3.07083676" z3="0.12752696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51831243" y3="0.15803267" z3="-2.18433743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84292435" y3="1.40242764" z3="-2.02274134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.64261683" y3="0.0815271" z3="-3.05231863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.06379184" y3="1.18045339" z3="-3.75920061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1591172" y3="-0.87749137" z3="-3.1578421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.92502195" y3="1.10871246" z3="-4.42927043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.28658529" y3="2.51457639" z3="-2.79166087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.36655944" y3="2.40632985" z3="-3.63456737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75185468" y3="3.46352683" z3="-2.71436198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.68599744" y3="3.27347304" z3="-4.21952728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57584467" y3="3.90445751" z3="-0.31865293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76894791" y3="5.05342207" z3="-0.07101168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9528689" y3="3.96334225" z3="0.03722348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50297903" y3="5.11131411" z3="0.55489331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57806509" y3="3.07880571" z3="-0.09760796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56352621" y3="5.13038843" z3="0.82111262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36974687" y3="6.23095035" z3="0.4537235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70867474" y3="6.2659684" z3="0.75406406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73924255" y3="7.10882804" z3="0.62529917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15980928" y3="7.17540487" z3="1.16052454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.26441952" y3="-3.95609396" z3="-2.92228885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50228558" y3="-4.98003486" z3="-2.59684527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.09067036" y3="-3.60814114" z3="-3.57084836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.35505202" y3="-3.98994267" z3="-3.54329128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.58794929" y3="-1.62982191" z3="-2.13105394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30144742" y3="-1.12963577" z3="-2.81020559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4124123" y3="-0.97824917" z3="-1.25953951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.63304683" y3="-1.69979753" z3="-2.67552904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9102,-.9522,-.7183;6.5478,-1.9466,-1.6714;6.0296,-.9952,-1.5176;4.7248,1.4734,-1.1297;4.2813,.3129,-.52;2.5994,2.7288,-1.0887;3.9661,2.7306,-.8727;2.3702,4.9879,-.3009;1.7718,3.8448,-.7752;1.7558,5.8629,-.0673;1.9987,1.6015,-1.5695;3.1658,.3678,.2647;1.7048,.3677,-.5099;.6485,.6934,.4801;1.6257,-.8741,-1.3696;1.1212,-2.5178,-1.228;2.3635,-5.5339,-6.1089;2.0303,-5.1001,-5.1618;1.1674,-3.9598,-2.7564;2.0025,-3.7202,-5.0106;1.6516,-5.9274,-4.1014;1.236,-5.3511,-2.908;1.5798,-3.1178,-3.8144;2.3035,-3.0523,-5.8215;1.6957,-7.0153,-4.1959;.9842,-5.9858,-2.0542;.7008,-3.4129,-1.5342;-.3313,-3.8988,-.836;-.6699,-4.894,-1.135;-.4281,-3.6208,.6136;-.5817,-3.201,3.3768;-.8115,-4.6633,1.4674;-.1389,-2.3636,1.1544;-.2134,-2.1562,2.5277;-.8796,-4.4558,2.8434;-1.0176,-5.6553,1.056;.1333,-1.5188,.5196;.0252,-1.1629,2.919;-1.1462,-5.286,3.5029;-.6294,-3.0418,4.458;1.552,-1.7822,-3.7847;1.591,-1.3729,-2.875;.2946,3.7152,-.8629;-2.0738,-3.0041,-1.7587;-2.9105,-3.1498,-.648;-3.1141,-2.2602,.2671;-3.8041,-.6728,.4942;-4.4363,-.0869,-1.1647;-2.5159,.3919,1.2931;-5.2361,-.9952,1.6591;-3.4394,-4.3439,-.423;-4.2111,-4.5506,.7503;-3.6449,.3471,-1.7938;-5.1975,.6936,-1.0053;-4.9077,-.9118,-1.7317;-1.5701,.4985,.729;-2.261,-.0078,2.2912;-2.9503,1.3979,1.4326;-5.6846,-.0328,1.9635;-6.0296,-1.6006,1.1857;-4.8965,-1.5148,2.5704;-5.1272,-3.9383,.7273;-3.6266,-4.3111,1.6516;-4.4769,-5.6157,.7414;4.3062,-2.1896,-.1584;4.1648,-3.3158,-.982;3.5242,-4.462,-.5264;3.0227,-4.475,.7692;3.182,-3.3922,1.6289;3.8214,-2.2526,1.1585;4.5126,-3.2779,-2.0177;3.3806,-5.3223,-1.1803;2.2618,-5.6382,1.2293;2.7778,-3.4413,2.6409;3.9216,-1.3874,1.8144;-.4805,3.9888,.2729;-1.8586,3.8172,.2554;-2.4603,3.3792,-.9207;-1.7231,3.1215,-2.0739;-.3435,3.2804,-2.0347;.0115,4.3043,1.1937;-2.4675,4.0083,1.1364;-3.9081,3.1578,-.9405;-2.2275,2.7859,-2.9763;.2499,3.0533,-2.9243;2.1333,-5.7978,2.4221;1.7847,-6.3715,.3826;-4.4531,3.0542,-2.0184;-4.4825,3.0708,.1275;6.5183,.158,-2.1843;5.8429,1.4024,-2.0227;7.6426,.0815,-3.0523;8.0638,1.1805,-3.7592;8.1591,-.8775,-3.1578;8.925,1.1087,-4.4293;6.2866,2.5146,-2.7917;7.3666,2.4063,-3.6346;5.7519,3.4635,-2.7144;7.686,3.2735,-4.2195;4.5758,3.9045,-.3187;3.7689,5.0534,-.071;5.9529,3.9633,.0372;6.503,5.1113,.5549;6.5781,3.0788,-.0976;7.5635,5.1304,.8211;4.3697,6.231,.4537;5.7087,6.266,.7541;3.7392,7.1088,.6253;6.1598,7.1754,1.1605;-2.2644,-3.9561,-2.9223;-2.5023,-4.98,-2.5968;-3.0907,-3.6081,-3.5708;-1.3551,-3.9899,-3.5433;-1.5879,-1.6298,-2.1311;-2.3014,-1.1296,-2.8102;-1.4124,-.9782,-1.2595;-.633,-1.6998,-2.6755;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662573418058</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004769238229 0.000816866069 0.014743264370 0.005336589707</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.053942871 -0.003392583 0.000163220 0.000228249 0.000339697 0.000346064 0.000371317 0.000430372 0.000534903 0.000647465 0.000765063 0.000819867 0.000952417 0.001088643 0.001243793 0.001254896 0.001274561 0.001390781 0.001506706 0.001651530 0.001771077 0.002012030 0.002222592 0.002572103 0.002953588 0.003195540 0.003626461 0.003690814 0.003774620 0.004359884 0.004620257 0.004857106 0.005075245 0.005484553 0.005835988 0.005901578 0.006516193 0.006812021 0.006969423 0.007447804 0.007801787 0.008392211 0.009014728 0.009198716 0.009433067 0.010178096 0.010417249 0.011527384 0.012666619 0.012959237 0.013110079 0.014169915 0.014427880 0.014721460 0.015150714 0.015493839 0.015669130 0.016316642 0.017227920 0.017517980 0.017819120 0.018075346 0.019456010 0.020075922 0.020553507 0.021994938 0.022583846 0.023219788 0.023653684 0.023872624 0.024775771 0.026023956 0.026457591 0.026708923 0.027747430 0.027974009 0.029969774 0.030437509 0.031866061 0.032430357 0.032720036 0.034766259 0.038127175 0.038670012 0.040633639 0.040993973 0.044166274 0.044770028 0.045257972 0.045764660 0.047543488 0.049669680 0.051344536 0.051556609 0.051816138 0.052272458 0.052326979 0.052551459 0.052647076 0.054067022 0.054467818 0.055420352 0.056494472 0.056873791 0.057140558 0.057747245 0.058613778 0.059208581 0.059447844 0.060660164 0.061233716 0.061626635 0.062556033 0.063946618 0.064576742 0.064648344 0.065624732 0.066138091 0.067693347 0.068219357 0.068584491 0.071276473 0.072331976 0.072749175 0.076500344 0.078781770 0.080597052 0.080834700 0.082159240 0.083592848 0.087143985 0.088577920 0.089560794 0.091028441 0.092865743 0.094138495 0.095311542 0.095752227 0.096660965 0.097646856 0.098402040 0.099735418 0.101150002 0.101332305 0.102081991 0.102879211 0.104030630 0.104629111 0.107158297 0.109402742 0.109891765 0.111308427 0.111747275 0.112917841 0.113403873 0.114656639 0.116465550 0.117290269 0.117707589 0.120775528 0.123287025 0.127086966 0.127251963 0.127782852 0.129296763 0.130286416 0.133078610 0.134706232 0.135853539 0.137109766 0.142305175 0.144563201 0.145233437 0.146106175 0.150985258 0.152916041 0.153982143 0.159802058 0.165726777 0.170683583 0.174573312 0.176692620 0.180688134 0.183312620 0.186025832 0.187712446 0.188836403 0.197021092 0.199097221 0.201856246 0.205361813 0.205887346 0.207148918 0.209076306 0.210947333 0.211581885 0.213153075 0.215745479 0.217032401 0.221322529 0.224912239 0.231541195 0.232744526 0.233996842 0.235376442 0.239582492 0.244977490 0.249497900 0.254815103 0.255437292 0.256947812 0.259499238 0.271382829 0.278384940 0.290884694 0.296941136 0.298856029 0.300276221 0.305343553 0.306562822 0.307553427 0.317837426 0.320942757 0.324417939 0.327680416 0.329407443 0.346772062 0.350980088 0.355071598 0.357164102 0.359313128 0.363883986 0.382718920 0.398549607 0.405983864 0.426271116 0.429845992 0.430678278 0.445681984 0.458204730 0.464471214 0.465903736 0.477886916 0.483265688 0.496886103 0.498043406 0.507138775 0.513663539 0.542916077 0.565459509 0.567122128 0.583339177 0.590445424 0.605149157 0.640665766 0.644617815 0.665550232 0.673519544 0.681324662 0.686286037 0.691869244 0.699154826 0.704242931 0.714940062 0.717867159 0.733218469 0.737530022 0.740031780 0.750704583 0.771582838 0.775881988 0.802980606 0.817258827 0.820133521 0.820898218 0.831606315 0.840411685 0.843328280 0.846645797 0.849918928 0.858431951 0.864504030 0.867347978 0.872071339 0.874404901 0.881081580 0.883901901 0.890855702 0.891672450 0.896179481 0.915957218 0.918342770 0.923979261 0.930987941 0.936295735 0.948941067 0.952023068 0.958825098 0.969544539 0.977529001 0.979771619 0.996386983 1.002625754 1.013693558 1.037113849 1.046863136 1.051658611 1.055286176 1.076137785 1.086075281 1.092540057 1.110106912 1.110764550 1.116371214 1.122474186 1.123446208 1.134502924 1.143900077 1.161269606 1.169803509 1.172915117 1.175758994 1.200535620 1.214079360 1.220536821 1.247309398 1.295039586 1.295835720 1.313683554 1.319232399 1.326300133 1.327160118 1.330142830 1.334528242 1.341045722 1.346077457 1.362407256 1.378788936 1.380902946 1.381382790 1.389013297 1.486946816 1.557508428 1.671863930 1.896378758</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">96</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91493072" y3="-0.95123258" z3="-0.72041998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55095342" y3="-1.94415591" z3="-1.67781019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03212656" y3="-0.99326284" z3="-1.52276314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72501779" y3="1.47384747" z3="-1.13273397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28469386" y3="0.31308543" z3="-0.52138335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59758184" y3="2.72616053" z3="-1.08742717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96493904" y3="2.72983311" z3="-0.87413886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36692117" y3="4.98415013" z3="-0.29689483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76870237" y3="3.84091854" z3="-0.77161328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75183313" y3="5.85833974" z3="-0.06185391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99829045" y3="1.59772809" z3="-1.56725315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17048414" y3="0.36682186" z3="0.26541595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70834644" y3="0.36362949" z3="-0.50687889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65284077" y3="0.68780828" z3="0.48422104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63059432" y3="-0.87885037" z3="-1.36574623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12450719" y3="-2.52257883" z3="-1.2234698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.36521123" y3="-5.5434791" z3="-6.10237191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.03213546" y3="-5.10842822" z3="-5.15582746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1696198" y3="-3.96492797" z3="-2.75194258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.00837661" y3="-3.72844465" z3="-5.00494051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64968467" y3="-5.93440394" z3="-4.09574987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23433402" y3="-5.35652115" z3="-2.90306485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58601992" y3="-3.12432836" z3="-3.80949032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.31241091" y3="-3.0616979" z3="-5.81561675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.69061809" y3="-7.02245042" z3="-4.18977428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97968223" y3="-5.99029056" z3="-2.04942373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70270898" y3="-3.41680461" z3="-1.53041826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33042583" y3="-3.9013129" z3="-0.83397218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67255003" y3="-4.89474177" z3="-1.13510431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.4305679" y3="-3.62378856" z3="0.61541234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.58856151" y3="-3.20868169" z3="3.378817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.81937859" y3="-4.66647631" z3="1.46628051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13860821" y3="-2.36880889" z3="1.1590271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21533921" y3="-2.16376313" z3="2.53265176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.88953918" y3="-4.46121136" z3="2.84240914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.02703116" y3="-5.65779395" z3="1.05289115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13826173" y3="-1.52434757" z3="0.5270102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02592241" y3="-1.17308267" z3="2.92678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.15940241" y3="-5.29200857" z3="3.49982845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.63693829" y3="-3.05170568" z3="4.46029613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.56259175" y3="-1.78874891" z3="-3.78029806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.59931781" y3="-1.37906122" z3="-2.87053501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29149957" y3="3.71255694" z3="-0.86080243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07202099" y3="-2.99892242" z3="-1.75971994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90972469" y3="-3.14685815" z3="-0.65122144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11360338" y3="-2.25839783" z3="0.26594561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80385506" y3="-0.66954191" z3="0.49059226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.43071322" y3="-0.08315864" z3="-1.16798533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51418053" y3="0.39053264" z3="1.29505574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23219791" y3="-0.98814681" z3="1.65177264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.441643" y3="-4.34063375" z3="-0.43030723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.2187189" y3="-4.5470791" z3="0.73966466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.63677237" y3="0.35695017" z3="-1.79255894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19884157" y3="0.69724002" z3="-1.01381492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.90067177" y3="-0.90438163" z3="-1.73845197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.56620793" y3="0.49701006" z3="0.73426587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26414813" y3="-0.01506632" z3="2.29241789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.94379726" y3="1.40043806" z3="1.43331577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68275579" y3="-0.02606867" z3="1.95780209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02672312" y3="-1.59009753" z3="1.17708937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89786478" y3="-1.51137242" z3="2.56678781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.13327269" y3="-3.93183927" z3="0.71262216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.63736446" y3="-4.3087773" z3="1.64457391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.48693082" y3="-5.61252017" z3="0.72905202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31288874" y3="-2.18846047" z3="-0.15823851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16733469" y3="-3.3146096" z3="-0.98112528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52522571" y3="-4.45934852" z3="-0.52359384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02661119" y3="-4.47079106" z3="0.77318151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19114542" y3="-3.38838264" z3="1.63248003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.83215994" y3="-2.25042644" z3="1.16021945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51228107" y3="-3.27747228" z3="-2.01775239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37735504" y3="-5.31922753" z3="-1.17706364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26270247" y3="-5.63140893" z3="1.2349288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78959713" y3="-3.43635429" z3="2.64555285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.93634699" y3="-1.38529351" z3="1.81575466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48396975" y3="3.99089417" z3="0.27139909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86280412" y3="3.8214237" z3="0.25472946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46233294" y3="3.38031886" z3="-0.9178618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72415789" y3="3.11777293" z3="-2.06919687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34465871" y3="3.27477056" z3="-2.03053375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01265616" y3="4.29671474" z3="1.19954054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46796955" y3="4.00669225" z3="1.14634479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90873182" y3="3.15751656" z3="-0.9353985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23789776" y3="2.791473" z3="-2.97987428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.2499836" y3="3.04431226" z3="-2.91517268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13217624" y3="-5.78795633" z3="2.42799206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78535401" y3="-6.36565062" z3="0.38928594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45253677" y3="3.05787482" z3="-2.01384403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48293911" y3="3.0626876" z3="0.13527336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51755494" y3="0.16041953" z3="-2.19128636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84117943" y3="1.4040857" z3="-2.02812963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.63926836" y3="0.0850709" z3="-3.06267984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.05697929" y3="1.1843482" z3="-3.77110016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.15649444" y3="-0.87338823" z3="-3.16974061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.91607737" y3="1.11338539" z3="-4.44401369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.2814925" y3="2.5167524" z3="-2.79812592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.35895781" y3="2.40956852" z3="-3.64433581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.74600876" y3="3.46517261" z3="-2.71899478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.67568856" y3="3.27698322" z3="-4.23035265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57412301" y3="3.90390182" z3="-0.31982064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76594134" y3="5.05128905" z3="-0.06896165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95172565" y3="3.96426787" z3="0.03369364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50090936" y3="5.11216445" z3="0.55260445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57810498" y3="3.08093906" z3="-0.10375294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56186998" y3="5.13239742" z3="0.81716734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36577883" y3="6.22879694" z3="0.45694451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70518824" y3="6.26523374" z3="0.75527091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73423075" y3="7.10542197" z3="0.63118089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15552465" y3="7.17454741" z3="1.16291706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.26136546" y3="-3.94649828" z3="-2.92644653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50285908" y3="-4.97079682" z3="-2.60470951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.08479988" y3="-3.5938764" z3="-3.57547243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.35052318" y3="-3.98050264" z3="-3.54549263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.58092176" y3="-1.62524657" z3="-2.12808456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29159029" y3="-1.12096849" z3="-2.80771976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.40417927" y3="-0.97512703" z3="-1.25536073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.62682369" y3="-1.69754256" z3="-2.67248379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9149,-.9512,-.7204;6.551,-1.9442,-1.6778;6.0321,-.9933,-1.5228;4.725,1.4738,-1.1327;4.2847,.3131,-.5214;2.5976,2.7262,-1.0874;3.9649,2.7298,-.8741;2.3669,4.9842,-.2969;1.7687,3.8409,-.7716;1.7518,5.8583,-.0619;1.9983,1.5977,-1.5673;3.1705,.3668,.2654;1.7083,.3636,-.5069;.6528,.6878,.4842;1.6306,-.8789,-1.3657;1.1245,-2.5226,-1.2235;2.3652,-5.5435,-6.1024;2.0321,-5.1084,-5.1558;1.1696,-3.9649,-2.7519;2.0084,-3.7284,-5.0049;1.6497,-5.9344,-4.0957;1.2343,-5.3565,-2.9031;1.586,-3.1243,-3.8095;2.3124,-3.0617,-5.8156;1.6906,-7.0225,-4.1898;.9797,-5.9903,-2.0494;.7027,-3.4168,-1.5304;-.3304,-3.9013,-.834;-.6726,-4.8947,-1.1351;-.4306,-3.6238,.6154;-.5886,-3.2087,3.3788;-.8194,-4.6665,1.4663;-.1386,-2.3688,1.159;-.2153,-2.1638,2.5327;-.8895,-4.4612,2.8424;-1.027,-5.6578,1.0529;.1383,-1.5243,.527;.0259,-1.1731,2.9268;-1.1594,-5.292,3.4998;-.6369,-3.0517,4.4603;1.5626,-1.7887,-3.7803;1.5993,-1.3791,-2.8705;.2915,3.7126,-.8608;-2.072,-2.9989,-1.7597;-2.9097,-3.1469,-.6512;-3.1136,-2.2584,.2659;-3.8039,-.6695,.4906;-4.4307,-.0832,-1.168;-2.5142,.3905,1.2951;-5.2322,-.9881,1.6518;-3.4416,-4.3406,-.4303;-4.2187,-4.5471,.7397;-3.6368,.357,-1.7926;-5.1988,.6972,-1.0138;-4.9007,-.9044,-1.7385;-1.5662,.497,.7343;-2.2641,-.0151,2.2924;-2.9438,1.4004,1.4333;-5.6828,-.0261,1.9578;-6.0267,-1.5901,1.1771;-4.8979,-1.5114,2.5668;-5.1333,-3.9318,.7126;-3.6374,-4.3088,1.6446;-4.4869,-5.6125,.7291;4.3129,-2.1885,-.1582;4.1673,-3.3146,-.9811;3.5252,-4.4593,-.5236;3.0266,-4.4708,.7732;3.1911,-3.3884,1.6325;3.8322,-2.2504,1.1602;4.5123,-3.2775,-2.0178;3.3774,-5.3192,-1.1771;2.2627,-5.6314,1.2349;2.7896,-3.4364,2.6456;3.9363,-1.3853,1.8158;-.484,3.9909,.2714;-1.8628,3.8214,.2547;-2.4623,3.3803,-.9179;-1.7242,3.1178,-2.0692;-.3447,3.2748,-2.0305;.0127,4.2967,1.1995;-2.468,4.0067,1.1463;-3.9087,3.1575,-.9354;-2.2379,2.7915,-2.9799;.25,3.0443,-2.9152;2.1322,-5.788,2.428;1.7854,-6.3657,.3893;-4.4525,3.0579,-2.0138;-4.4829,3.0627,.1353;6.5176,.1604,-2.1913;5.8412,1.4041,-2.0281;7.6393,.0851,-3.0627;8.057,1.1843,-3.7711;8.1565,-.8734,-3.1697;8.9161,1.1134,-4.444;6.2815,2.5168,-2.7981;7.359,2.4096,-3.6443;5.746,3.4652,-2.719;7.6757,3.277,-4.2304;4.5741,3.9039,-.3198;3.7659,5.0513,-.069;5.9517,3.9643,.0337;6.5009,5.1122,.5526;6.5781,3.0809,-.1038;7.5619,5.1324,.8172;4.3658,6.2288,.4569;5.7052,6.2652,.7553;3.7342,7.1054,.6312;6.1555,7.1745,1.1629;-2.2614,-3.9465,-2.9264;-2.5029,-4.9708,-2.6047;-3.0848,-3.5939,-3.5755;-1.3505,-3.9805,-3.5455;-1.5809,-1.6252,-2.1281;-2.2916,-1.121,-2.8077;-1.4042,-.9751,-1.2554;-.6268,-1.6975,-2.6725;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662548329303</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004963180840 0.000863467323 0.017066759971 0.005336755491</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054008186 -0.004432628 0.000159567 0.000241296 0.000338653 0.000357694 0.000368464 0.000436371 0.000534001 0.000648785 0.000765612 0.000821208 0.000958760 0.001088853 0.001244019 0.001255020 0.001274324 0.001390822 0.001513410 0.001653845 0.001772709 0.002046320 0.002222673 0.002601164 0.002957094 0.003200445 0.003630491 0.003697733 0.003800619 0.004361820 0.004703289 0.004873217 0.005087483 0.005482898 0.005837142 0.005907067 0.006517448 0.006826096 0.006970763 0.007461005 0.007801578 0.008424498 0.009023073 0.009224909 0.009433547 0.010222083 0.010418103 0.011534008 0.012684000 0.012960168 0.013116103 0.014292071 0.014438057 0.014801170 0.015152594 0.015516672 0.015668995 0.016319659 0.017235613 0.017551864 0.017803830 0.018074435 0.019669619 0.020108079 0.020663222 0.022000535 0.022583522 0.023223146 0.023771097 0.023889168 0.024891557 0.026046735 0.026456875 0.026712594 0.027746999 0.027976418 0.029982276 0.030437939 0.031868533 0.032443033 0.032721169 0.034870759 0.038272606 0.038678888 0.040630295 0.041020709 0.044184915 0.044836866 0.045268415 0.045802844 0.047738934 0.049669713 0.051350290 0.051557099 0.051816277 0.052272428 0.052327001 0.052552684 0.052646523 0.054066740 0.054580962 0.055446351 0.056494955 0.056876604 0.057140597 0.057752450 0.058620203 0.059208748 0.059460607 0.060659708 0.061240208 0.061628364 0.062554976 0.063997889 0.064576136 0.064989892 0.065945901 0.066142675 0.067750284 0.068241476 0.068586426 0.071308140 0.072371960 0.072771859 0.076506193 0.078872543 0.080676361 0.080834934 0.082324551 0.083654283 0.087148117 0.088580419 0.089564932 0.091058441 0.092866909 0.094165112 0.095316422 0.095759858 0.096669707 0.097662963 0.098631472 0.099742451 0.101172284 0.101330414 0.102452133 0.102910274 0.104050227 0.105479338 0.107192604 0.109404886 0.109899413 0.111477278 0.111895251 0.113046608 0.113899670 0.114656944 0.116466093 0.117299922 0.117725397 0.121146238 0.123363888 0.127086276 0.127265413 0.127887083 0.129513096 0.130292726 0.133080268 0.134721085 0.135856850 0.137108847 0.142312139 0.144562833 0.145304148 0.146122031 0.150986797 0.152926563 0.153987105 0.159896852 0.165746549 0.170697569 0.174575123 0.176709272 0.180703745 0.183334026 0.186029614 0.187715030 0.188857294 0.197034013 0.199098885 0.201856276 0.205366185 0.205901382 0.207149304 0.209077335 0.211169285 0.211857939 0.213152997 0.215973914 0.217336464 0.221331262 0.224922462 0.231541142 0.232744404 0.233999611 0.235376501 0.239589440 0.245012753 0.249497277 0.254831823 0.255442390 0.256957840 0.259698540 0.271383070 0.278398327 0.290887980 0.297037624 0.298861955 0.300331292 0.305533255 0.306567736 0.307553438 0.317837996 0.320943525 0.324440819 0.327682595 0.329428835 0.346776743 0.350986231 0.355100016 0.357271246 0.359314462 0.363884603 0.382762108 0.398562367 0.405992096 0.426642882 0.429846280 0.430712378 0.445685992 0.458210005 0.464504920 0.465945319 0.477887056 0.483656343 0.496887505 0.498043652 0.507985094 0.513921877 0.542972037 0.565468502 0.567131683 0.583339502 0.590445053 0.605158256 0.640665609 0.644631838 0.665556370 0.673595015 0.681359604 0.687370134 0.691894768 0.699173191 0.704243142 0.714940091 0.719072285 0.733213414 0.737577990 0.740407712 0.750706091 0.771583189 0.775897417 0.802983155 0.817261248 0.820137671 0.820918512 0.831628921 0.840412063 0.843341030 0.846664789 0.849936212 0.858433430 0.864526032 0.867348479 0.872093826 0.874404535 0.881119307 0.884032194 0.890859340 0.891718054 0.896313462 0.915970591 0.918367574 0.924002739 0.931006751 0.936296591 0.948942352 0.952083339 0.958828830 0.969555957 0.977619726 0.980088073 0.997006728 1.003753227 1.013819092 1.037439932 1.047374195 1.052788755 1.055289390 1.076145448 1.086246956 1.093935890 1.110112963 1.110769758 1.116371486 1.122474190 1.123446382 1.134504112 1.143906313 1.161272836 1.169803930 1.172921759 1.175763570 1.200535703 1.214081431 1.220604075 1.247309880 1.295039709 1.295846965 1.313796004 1.319974218 1.326300414 1.327161630 1.330144085 1.334530358 1.341046760 1.346082084 1.362407736 1.378790164 1.380902979 1.381383332 1.389172301 1.487774226 1.557508575 1.671864220 1.896731739</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">97</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91954164" y3="-0.95025101" z3="-0.72268592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5536913" y3="-1.94188404" z3="-1.68466957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03447588" y3="-0.99141379" z3="-1.52828158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72593562" y3="1.47444011" z3="-1.13486035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28830477" y3="0.31337325" z3="-0.52239061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59739905" y3="2.72386083" z3="-1.08614251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96481166" y3="2.72938835" z3="-0.8746198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36472641" y3="4.98085964" z3="-0.29331924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76796969" y3="3.83737486" z3="-0.76891946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74857243" y3="5.85392561" z3="-0.05621108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99878104" y3="1.59462415" z3="-1.56516573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17536595" y3="0.36605835" z3="0.26638086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71230029" y3="0.36018008" z3="-0.50415704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65735941" y3="0.68302728" z3="0.48807583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63557527" y3="-0.88273322" z3="-1.3625243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12709844" y3="-2.52678159" z3="-1.22026016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.36486899" y3="-5.55299723" z3="-6.09722198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.03244396" y3="-5.11665872" z3="-5.15101564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17093492" y3="-3.96980904" z3="-2.7481853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.0129021" y3="-3.73651904" z3="-5.00042349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64653943" y3="-5.94116626" z3="-4.0910565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.23184583" y3="-5.36166517" z3="-2.89885707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.59109326" y3="-3.13085385" z3="-3.80553666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.31970987" y3="-3.07095142" z3="-5.8110299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.68412598" y3="-7.02936826" z3="-4.18481195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97449842" y3="-5.99442692" z3="-2.04526777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70359467" y3="-3.41981686" z3="-1.52772454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33378083" y3="-3.90057939" z3="-0.8336111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67662572" y3="-4.89345839" z3="-1.13546735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43391319" y3="-3.62584974" z3="0.61637942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.59508573" y3="-3.21602226" z3="3.38043597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.8280008" y3="-4.66869456" z3="1.46447705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13706956" y3="-2.37373401" z3="1.16329015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21539791" y3="-2.17143941" z3="2.53724954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.90011652" y3="-4.46603611" z3="2.84080673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.03869938" y3="-5.65794256" z3="1.04851077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14496431" y3="-1.52932652" z3="0.53355516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02947644" y3="-1.18287649" z3="2.93414975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.17465667" y3="-5.29677106" z3="3.49606867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.64503291" y3="-3.06091469" z3="4.46207922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.57170763" y3="-1.79515105" z3="-3.77635722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.60805161" y3="-1.38537832" z3="-2.86695383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29074988" y3="3.70701602" z3="-0.85514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06735748" y3="-2.99393037" z3="-1.76116402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90953679" y3="-3.14235911" z3="-0.65522172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11432477" y3="-2.25593909" z3="0.26309147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79774227" y3="-0.66593821" z3="0.48948448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.42483336" y3="-0.08054577" z3="-1.16836968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51065395" y3="0.39277038" z3="1.29434492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23448459" y3="-0.98367611" z3="1.64901039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44429731" y3="-4.33543006" z3="-0.43834802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.22575666" y3="-4.54380828" z3="0.72839101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.62939977" y3="0.35698326" z3="-1.79169361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19806202" y3="0.69661034" z3="-1.01828509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.88816817" y3="-0.90516198" z3="-1.73706508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.56544668" y3="0.4954518" z3="0.73259372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25801167" y3="-0.00417324" z3="2.28920852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.94497205" y3="1.39916561" z3="1.43389587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68391056" y3="-0.02163443" z3="1.95504571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02679359" y3="-1.58591969" z3="1.16913533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.90011175" y3="-1.50462082" z3="2.56185933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.13820769" y3="-3.92607998" z3="0.70112551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.64677883" y3="-4.3122053" z3="1.63524355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.49785763" y3="-5.60715574" z3="0.71198526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3193749" y3="-2.18731793" z3="-0.1582342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16870745" y3="-3.31306444" z3="-0.98069472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5252281" y3="-4.45625651" z3="-0.52114191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.03053072" y3="-4.46643255" z3="0.7771612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.20135458" y3="-3.38486871" z3="1.63631198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.84376576" y3="-2.24854759" z3="1.16210481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51000823" y3="-3.27646297" z3="-2.01858535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3724763" y3="-5.31553518" z3="-1.17437105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26377687" y3="-5.62457543" z3="1.24083338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.80356774" y3="-3.43221706" z3="2.65087347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.95273325" y3="-1.38391616" z3="1.81756653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48391945" y3="3.98479889" z3="0.27994548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86162357" y3="3.81416195" z3="0.264233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4647854" y3="3.37667225" z3="-0.91268874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72862512" y3="3.11623318" z3="-2.06698963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34780178" y3="3.2695033" z3="-2.02485685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00503891" y3="4.30635203" z3="1.19668952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46998155" y3="4.00838357" z3="1.14544707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.91421051" y3="3.16153735" z3="-0.93405551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23245865" y3="2.77903432" z3="-2.96795564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24689056" y3="3.03624754" z3="-2.90987203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13136285" y3="-5.77779169" z3="2.43414194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78628325" y3="-6.36021622" z3="0.39649157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.46073445" y3="3.06321787" z3="-2.01066708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48774553" y3="3.07357094" z3="0.13306591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51688073" y3="0.16269994" z3="-2.19837065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.83985857" y3="1.40578336" z3="-2.03320126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.63610501" y3="0.0885312" z3="-3.07309548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.05069773" y3="1.18830626" z3="-3.78258385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.15396026" y3="-0.86940072" z3="-3.18177269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.90784277" y3="1.1181823" z3="-4.45805059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.27699379" y3="2.51905698" z3="-2.80413629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.35208297" y3="2.41296398" z3="-3.65352511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.74088414" y3="3.46697964" z3="-2.723103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.6664335" y3="3.28078084" z3="-4.2402102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57309776" y3="3.90366681" z3="-0.32019323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76369382" y3="5.04953409" z3="-0.06651968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95125279" y3="3.96531241" z3="0.03109756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49958865" y3="5.11300423" z3="0.55131401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57863669" y3="3.08302331" z3="-0.10917092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56106301" y3="5.13420679" z3="0.8141483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36252535" y3="6.226855" z3="0.46095415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70232906" y3="6.26450037" z3="0.75756947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72985983" y3="7.10221096" z3="0.6378574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15196399" y3="7.17360872" z3="1.16646803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.25714377" y3="-3.93918342" z3="-2.93073118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50057956" y3="-4.96423734" z3="-2.61016934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.07947426" y3="-3.58418239" z3="-3.58127447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.34552321" y3="-3.97378156" z3="-3.54858932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.57389744" y3="-1.62011539" z3="-2.12470484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28257903" y3="-1.11272761" z3="-2.80358992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.39664166" y3="-0.974787" z3="-1.24965035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.61679101" y3="-1.69369672" z3="-2.66641833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9195,-.9503,-.7227;6.5537,-1.9419,-1.6847;6.0345,-.9914,-1.5283;4.7259,1.4744,-1.1349;4.2883,.3134,-.5224;2.5974,2.7239,-1.0861;3.9648,2.7294,-.8746;2.3647,4.9809,-.2933;1.768,3.8374,-.7689;1.7486,5.8539,-.0562;1.9988,1.5946,-1.5652;3.1754,.3661,.2664;1.7123,.3602,-.5042;.6574,.683,.4881;1.6356,-.8827,-1.3625;1.1271,-2.5268,-1.2203;2.3649,-5.553,-6.0972;2.0324,-5.1167,-5.151;1.1709,-3.9698,-2.7482;2.0129,-3.7365,-5.0004;1.6465,-5.9412,-4.0911;1.2318,-5.3617,-2.8989;1.5911,-3.1309,-3.8055;2.3197,-3.071,-5.811;1.6841,-7.0294,-4.1848;.9745,-5.9944,-2.0453;.7036,-3.4198,-1.5277;-.3338,-3.9006,-.8336;-.6766,-4.8935,-1.1355;-.4339,-3.6258,.6164;-.5951,-3.216,3.3804;-.828,-4.6687,1.4645;-.1371,-2.3737,1.1633;-.2154,-2.1714,2.5372;-.9001,-4.466,2.8408;-1.0387,-5.6579,1.0485;.145,-1.5293,.5336;.0295,-1.1829,2.9341;-1.1747,-5.2968,3.4961;-.645,-3.0609,4.4621;1.5717,-1.7952,-3.7764;1.6081,-1.3854,-2.867;.2907,3.707,-.8551;-2.0674,-2.9939,-1.7612;-2.9095,-3.1424,-.6552;-3.1143,-2.2559,.2631;-3.7977,-.6659,.4895;-4.4248,-.0805,-1.1684;-2.5107,.3928,1.2943;-5.2345,-.9837,1.649;-3.4443,-4.3354,-.4383;-4.2258,-4.5438,.7284;-3.6294,.357,-1.7917;-5.1981,.6966,-1.0183;-4.8882,-.9052,-1.7371;-1.5654,.4955,.7326;-2.258,-.0042,2.2892;-2.945,1.3992,1.4339;-5.6839,-.0216,1.955;-6.0268,-1.5859,1.1691;-4.9001,-1.5046,2.5619;-5.1382,-3.9261,.7011;-3.6468,-4.3122,1.6352;-4.4979,-5.6072,.712;4.3194,-2.1873,-.1582;4.1687,-3.3131,-.9807;3.5252,-4.4563,-.5211;3.0305,-4.4664,.7772;3.2014,-3.3849,1.6363;3.8438,-2.2485,1.1621;4.51,-3.2765,-2.0186;3.3725,-5.3155,-1.1744;2.2638,-5.6246,1.2408;2.8036,-3.4322,2.6509;3.9527,-1.3839,1.8176;-.4839,3.9848,.2799;-1.8616,3.8142,.2642;-2.4648,3.3767,-.9127;-1.7286,3.1162,-2.067;-.3478,3.2695,-2.0249;.005,4.3064,1.1967;-2.47,4.0084,1.1454;-3.9142,3.1615,-.9341;-2.2325,2.779,-2.968;.2469,3.0362,-2.9099;2.1314,-5.7778,2.4341;1.7863,-6.3602,.3965;-4.4607,3.0632,-2.0107;-4.4877,3.0736,.1331;6.5169,.1627,-2.1984;5.8399,1.4058,-2.0332;7.6361,.0885,-3.0731;8.0507,1.1883,-3.7826;8.154,-.8694,-3.1818;8.9078,1.1182,-4.4581;6.277,2.5191,-2.8041;7.3521,2.413,-3.6535;5.7409,3.467,-2.7231;7.6664,3.2808,-4.2402;4.5731,3.9037,-.3202;3.7637,5.0495,-.0665;5.9513,3.9653,.0311;6.4996,5.113,.5513;6.5786,3.083,-.1092;7.5611,5.1342,.8141;4.3625,6.2269,.461;5.7023,6.2645,.7576;3.7299,7.1022,.6379;6.152,7.1736,1.1665;-2.2571,-3.9392,-2.9307;-2.5006,-4.9642,-2.6102;-3.0795,-3.5842,-3.5813;-1.3455,-3.9738,-3.5486;-1.5739,-1.6201,-2.1247;-2.2826,-1.1127,-2.8036;-1.3966,-.9748,-1.2497;-.6168,-1.6937,-2.6664;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662489011745</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006060650594 0.001124100703 0.018685683894 0.005338366521</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054112674 -0.006177528 0.000157893 0.000238515 0.000341453 0.000355288 0.000370965 0.000429911 0.000533681 0.000650033 0.000765814 0.000821747 0.000957762 0.001088878 0.001244082 0.001255169 0.001274463 0.001394846 0.001512486 0.001660737 0.001772815 0.002050795 0.002222287 0.002607187 0.002963148 0.003204608 0.003635515 0.003698806 0.003804497 0.004362291 0.004715946 0.004886841 0.005090557 0.005550695 0.005837191 0.005917358 0.006517370 0.006828759 0.006974144 0.007471104 0.007801322 0.008431788 0.009048556 0.009233749 0.009443322 0.010228572 0.010420139 0.011537056 0.012688286 0.012960657 0.013123041 0.014357931 0.014445783 0.014876931 0.015164762 0.015533926 0.015670924 0.016320616 0.017233693 0.017552395 0.018059280 0.018112670 0.019703583 0.020200790 0.020722507 0.022076397 0.022589750 0.023239546 0.023840364 0.023948705 0.025021717 0.026071572 0.026465785 0.026731783 0.027754974 0.028057374 0.029990168 0.030439257 0.031868855 0.032444789 0.032725549 0.034938225 0.038502060 0.038707576 0.040648367 0.041052059 0.044253616 0.045108799 0.045288647 0.045825352 0.047940328 0.049670004 0.051368225 0.051560652 0.051816918 0.052273235 0.052328168 0.052552837 0.052660476 0.054069545 0.054699162 0.055459874 0.056495314 0.056876699 0.057141529 0.057754255 0.058620739 0.059209635 0.059478831 0.060659580 0.061244340 0.061629398 0.062565176 0.064047218 0.064578173 0.065078991 0.066126563 0.067209717 0.067747412 0.068278993 0.068591130 0.071303768 0.072384873 0.072793728 0.076514119 0.078933239 0.080833779 0.080862012 0.082663007 0.083953206 0.087288604 0.088585113 0.089565639 0.091062644 0.092867525 0.094183746 0.095318155 0.095762978 0.096672562 0.097703786 0.098821715 0.099747646 0.101172130 0.101363677 0.102672895 0.102955211 0.104051119 0.106700665 0.107568255 0.109418805 0.109936733 0.111575823 0.112143099 0.113098856 0.114650636 0.115199072 0.116467963 0.117315855 0.117723681 0.121738473 0.123603744 0.127139455 0.127265878 0.127900303 0.129600264 0.130408543 0.133080347 0.134730883 0.135856413 0.137117808 0.142311721 0.144562606 0.145315649 0.146128723 0.150998682 0.152955044 0.154008252 0.160053795 0.165791221 0.170711797 0.174577242 0.176720906 0.180723327 0.183366317 0.186039388 0.187714837 0.188859439 0.197048167 0.199279550 0.201856493 0.205368963 0.205910490 0.207150277 0.209078111 0.211298504 0.212378340 0.213154213 0.216061283 0.217704809 0.221331698 0.224943242 0.231541872 0.232750455 0.234002071 0.235378016 0.239673293 0.245170202 0.249506135 0.254838026 0.255442092 0.256957293 0.260129637 0.271383771 0.278401713 0.290941720 0.297255957 0.298871003 0.300342238 0.305616250 0.306580525 0.307553517 0.317839231 0.320965128 0.324623030 0.327684098 0.329462468 0.346833093 0.351025676 0.355176422 0.357447441 0.359327357 0.363884810 0.382928807 0.398787895 0.406002389 0.427450227 0.429846613 0.430804500 0.445694107 0.458210093 0.464511871 0.465991862 0.477887137 0.484026229 0.496887333 0.498043933 0.508866894 0.514268937 0.543028661 0.565473214 0.567140805 0.583341740 0.590459720 0.605179391 0.640667154 0.644655631 0.665556374 0.673694059 0.681376228 0.687807900 0.691918140 0.699189949 0.704243340 0.714945124 0.721147176 0.733480415 0.737609234 0.740490100 0.750707156 0.771583365 0.775908873 0.803013011 0.817261328 0.820138000 0.820923248 0.831628477 0.840412159 0.843341464 0.846685710 0.849936656 0.858435021 0.864530653 0.867349725 0.872391698 0.874404331 0.881570298 0.884074414 0.890861099 0.892291536 0.896354360 0.916030309 0.918414333 0.924039465 0.931020451 0.936314651 0.949166910 0.952609670 0.958870864 0.969568410 0.978314851 0.980577884 0.997490367 1.005296680 1.014018195 1.037758863 1.047859428 1.054501001 1.055299362 1.076149045 1.086393913 1.095442594 1.110114247 1.110769992 1.116372224 1.122474209 1.123446388 1.134504101 1.143911120 1.161272836 1.169803941 1.172923118 1.175763835 1.200535924 1.214081698 1.220606960 1.247311908 1.295051123 1.295873010 1.313941591 1.321379552 1.326300370 1.327162370 1.330146523 1.334530341 1.341046775 1.346089793 1.362409432 1.378790660 1.380903411 1.381387050 1.389549650 1.489471522 1.557509532 1.671864256 1.897081203</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">98</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92462924" y3="-0.94915943" z3="-0.72477012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55668388" y3="-1.93959225" z3="-1.69147209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03723826" y3="-0.98948793" z3="-1.53348842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72700892" y3="1.4751618" z3="-1.13707287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29225665" y3="0.31369756" z3="-0.52341149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59634718" y3="2.72136892" z3="-1.08437646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96439998" y3="2.72892267" z3="-0.87534548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36186311" y3="4.97730429" z3="-0.28939922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76510696" y3="3.83342408" z3="-0.76476689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74529472" y3="5.84959158" z3="-0.05186668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99919901" y3="1.59121432" z3="-1.56299726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18049429" y3="0.36491111" z3="0.26707608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71638756" y3="0.35605966" z3="-0.50160226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66185472" y3="0.67699025" z3="0.49166615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64101944" y3="-0.88725762" z3="-1.35965144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12995568" y3="-2.53093639" z3="-1.21713275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.3623985" y3="-5.56292586" z3="-6.09255557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.03094715" y3="-5.125174" z3="-5.14664872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17171488" y3="-3.97471481" z3="-2.74488783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.01606002" y3="-3.74497011" z3="-4.99642886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.64183103" y3="-5.94813099" z3="-4.08666542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22827573" y3="-5.36683791" z3="-2.89499635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.59580271" y3="-3.1373878" z3="-3.80191831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.32566759" y3="-3.08072167" z3="-5.80704764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.67607851" y3="-7.03649263" z3="-4.18001077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96849613" y3="-5.99849602" z3="-2.04135285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70462605" y3="-3.4231824" z3="-1.52498103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33289689" y3="-3.90286185" z3="-0.8317335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68034401" y3="-4.89321656" z3="-1.13620551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43598263" y3="-3.6287609" z3="0.61783645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.60083187" y3="-3.2223013" z3="3.3822005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.83638897" y3="-4.6713487" z3="1.46370827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13553932" y3="-2.37789663" z3="1.16685637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.2160641" y3="-2.17722022" z3="2.54104832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.90999682" y3="-4.47068915" z3="2.84027265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.05171235" y3="-5.65864618" z3="1.04552462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15009082" y3="-1.53287701" z3="0.53872904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03088854" y3="-1.18915541" z3="2.93959707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.18960288" y3="-5.30129237" z3="3.4939236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.65251375" y3="-3.06860915" z3="4.46402088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.58215107" y3="-1.80173563" z3="-3.77326132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.61574283" y3="-1.39135871" z3="-2.86344477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.28793973" y3="3.70305147" z3="-0.85208354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06647499" y3="-2.98805746" z3="-1.76320151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90965624" y3="-3.13732064" z3="-0.65914911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11267771" y3="-2.2531451" z3="0.26208257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79837736" y3="-0.66419213" z3="0.48898559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.42092226" y3="-0.07873125" z3="-1.17291602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50895481" y3="0.39409551" z3="1.2938563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23255588" y3="-0.98071132" z3="1.64616492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44871142" y3="-4.3296673" z3="-0.44769775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.23336105" y3="-4.54038144" z3="0.71609236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.62548867" y3="0.36752023" z3="-1.79223786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19135433" y3="0.69393264" z3="-1.01698146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.87807813" y3="-0.90720307" z3="-1.74981605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.55777618" y3="0.49807053" z3="0.73621092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26410197" y3="-0.01355409" z3="2.29509585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.93681978" y3="1.40398141" z3="1.43265878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67832942" y3="-0.01589834" z3="1.95178822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02829424" y3="-1.57804575" z3="1.16903083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.90237874" y3="-1.50754759" z3="2.56017856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.1436279" y3="-3.91952111" z3="0.69030817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.65515872" y3="-4.31460644" z3="1.6253339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.50909019" y3="-5.60314096" z3="0.69478954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.32623585" y3="-2.18597812" z3="-0.15805374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16939935" y3="-3.31091011" z3="-0.98035221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52444705" y3="-4.45239764" z3="-0.51864239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.03442769" y3="-4.46147756" z3="0.78146536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.21256411" y3="-3.38111509" z3="1.64068357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.85664636" y3="-2.2466814" z3="1.1644449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50647831" y3="-3.27468057" z3="-2.01966131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3664864" y3="-5.31100575" z3="-1.17155794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26467979" y3="-5.6169428" z3="1.24717165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.81930501" y3="-3.42801461" z3="2.65701406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.97141894" y3="-1.38297708" z3="1.82012935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48861661" y3="3.98829133" z3="0.2772247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86823816" y3="3.82279396" z3="0.25824401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46742841" y3="3.37747142" z3="-0.91137374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72744735" y3="3.10506862" z3="-2.05715735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34815918" y3="3.26024693" z3="-2.01964461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00996009" y3="4.29789417" z3="1.20527322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47469137" y3="4.01482011" z3="1.14579858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.91560297" y3="3.16272283" z3="-0.93082101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23975395" y3="2.77475788" z3="-2.96641082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.2448434" y3="3.02739022" z3="-2.90757206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13064714" y3="-5.76691828" z3="2.44071789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78662016" y3="-6.35363135" z3="0.40413191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.46062914" y3="3.06927399" z3="-2.00978132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48973542" y3="3.06738099" z3="0.13977401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51669168" y3="0.16517529" z3="-2.20486288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8390462" y3="1.40769872" z3="-2.03769257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6334835" y3="0.09213918" z3="-3.08276746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.04523317" y3="1.19243656" z3="-3.7931156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.15181387" y3="-0.86534412" z3="-3.19325685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.90052369" y3="1.12314766" z3="-4.47099877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.27329397" y3="2.52154753" z3="-2.80939406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.34612604" y3="2.41654569" z3="-3.66173657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73662806" y3="3.46899511" z3="-2.72662918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.65824437" y3="3.28476389" z3="-4.24903354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57205638" y3="3.9034587" z3="-0.32062515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76126064" y3="5.04771252" z3="-0.06434724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95053936" y3="3.96669727" z3="0.02892924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49770916" y3="5.11429393" z3="0.55059175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57906105" y3="3.08572171" z3="-0.11336047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55926935" y3="5.13672898" z3="0.81246067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35911465" y3="6.22504392" z3="0.46425944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69903569" y3="6.26414275" z3="0.75977205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72548343" y3="7.09915118" z3="0.64338569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14770166" y3="7.17308855" z3="1.17006544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.25335485" y3="-3.93134736" z3="-2.93472938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49681643" y3="-4.95689658" z3="-2.61768485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.07463984" y3="-3.57590899" z3="-3.586285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.34049219" y3="-3.96461099" z3="-3.55071073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.56634856" y3="-1.61528422" z3="-2.12136748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2714011" y3="-1.10370815" z3="-2.8009519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.39119668" y3="-0.97150294" z3="-1.24347437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.60964738" y3="-1.68873785" z3="-2.6609856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9246,-.9492,-.7248;6.5567,-1.9396,-1.6915;6.0372,-.9895,-1.5335;4.727,1.4752,-1.1371;4.2923,.3137,-.5234;2.5963,2.7214,-1.0844;3.9644,2.7289,-.8753;2.3619,4.9773,-.2894;1.7651,3.8334,-.7648;1.7453,5.8496,-.0519;1.9992,1.5912,-1.563;3.1805,.3649,.2671;1.7164,.3561,-.5016;.6619,.677,.4917;1.641,-.8873,-1.3597;1.13,-2.5309,-1.2171;2.3624,-5.5629,-6.0926;2.0309,-5.1252,-5.1466;1.1717,-3.9747,-2.7449;2.0161,-3.745,-4.9964;1.6418,-5.9481,-4.0867;1.2283,-5.3668,-2.895;1.5958,-3.1374,-3.8019;2.3257,-3.0807,-5.807;1.6761,-7.0365,-4.18;.9685,-5.9985,-2.0414;.7046,-3.4232,-1.525;-.3329,-3.9029,-.8317;-.6803,-4.8932,-1.1362;-.436,-3.6288,.6178;-.6008,-3.2223,3.3822;-.8364,-4.6713,1.4637;-.1355,-2.3779,1.1669;-.2161,-2.1772,2.541;-.91,-4.4707,2.8403;-1.0517,-5.6586,1.0455;.1501,-1.5329,.5387;.0309,-1.1892,2.9396;-1.1896,-5.3013,3.4939;-.6525,-3.0686,4.464;1.5822,-1.8017,-3.7733;1.6157,-1.3914,-2.8634;.2879,3.7031,-.8521;-2.0665,-2.9881,-1.7632;-2.9097,-3.1373,-.6591;-3.1127,-2.2531,.2621;-3.7984,-.6642,.489;-4.4209,-.0787,-1.1729;-2.509,.3941,1.2939;-5.2326,-.9807,1.6462;-3.4487,-4.3297,-.4477;-4.2334,-4.5404,.7161;-3.6255,.3675,-1.7922;-5.1914,.6939,-1.017;-4.8781,-.9072,-1.7498;-1.5578,.4981,.7362;-2.2641,-.0136,2.2951;-2.9368,1.404,1.4327;-5.6783,-.0159,1.9518;-6.0283,-1.578,1.169;-4.9024,-1.5075,2.5602;-5.1436,-3.9195,.6903;-3.6552,-4.3146,1.6253;-4.5091,-5.6031,.6948;4.3262,-2.186,-.1581;4.1694,-3.3109,-.9804;3.5244,-4.4524,-.5186;3.0344,-4.4615,.7815;3.2126,-3.3811,1.6407;3.8566,-2.2467,1.1644;4.5065,-3.2747,-2.0197;3.3665,-5.311,-1.1716;2.2647,-5.6169,1.2472;2.8193,-3.428,2.657;3.9714,-1.383,1.8201;-.4886,3.9883,.2772;-1.8682,3.8228,.2582;-2.4674,3.3775,-.9114;-1.7274,3.1051,-2.0572;-.3482,3.2602,-2.0196;.01,4.2979,1.2053;-2.4747,4.0148,1.1458;-3.9156,3.1627,-.9308;-2.2398,2.7748,-2.9664;.2448,3.0274,-2.9076;2.1306,-5.7669,2.4407;1.7866,-6.3536,.4041;-4.4606,3.0693,-2.0098;-4.4897,3.0674,.1398;6.5167,.1652,-2.2049;5.839,1.4077,-2.0377;7.6335,.0921,-3.0828;8.0452,1.1924,-3.7931;8.1518,-.8653,-3.1933;8.9005,1.1231,-4.471;6.2733,2.5215,-2.8094;7.3461,2.4165,-3.6617;5.7366,3.469,-2.7266;7.6582,3.2848,-4.249;4.5721,3.9035,-.3206;3.7613,5.0477,-.0643;5.9505,3.9667,.0289;6.4977,5.1143,.5506;6.5791,3.0857,-.1134;7.5593,5.1367,.8125;4.3591,6.225,.4643;5.699,6.2641,.7598;3.7255,7.0992,.6434;6.1477,7.1731,1.1701;-2.2534,-3.9313,-2.9347;-2.4968,-4.9569,-2.6177;-3.0746,-3.5759,-3.5863;-1.3405,-3.9646,-3.5507;-1.5663,-1.6153,-2.1214;-2.2714,-1.1037,-2.801;-1.3912,-.9715,-1.2435;-.6096,-1.6887,-2.661;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662465783542</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007409369582 0.001158788652 0.020521353583 0.005337857603</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054273930 -0.005759943 0.000157921 0.000252595 0.000339665 0.000357903 0.000369833 0.000429331 0.000534797 0.000648876 0.000765974 0.000821470 0.000957908 0.001090037 0.001244529 0.001255759 0.001274703 0.001396118 0.001514019 0.001661468 0.001772744 0.002059275 0.002222341 0.002612984 0.002964313 0.003207208 0.003635928 0.003717744 0.003805111 0.004366221 0.004723471 0.004892203 0.005090588 0.005552578 0.005839083 0.005921392 0.006516863 0.006828956 0.006982716 0.007471585 0.007802529 0.008443555 0.009165918 0.009233310 0.009496315 0.010232007 0.010429213 0.011536907 0.012690642 0.012961402 0.013132305 0.014354642 0.014445461 0.014872632 0.015172486 0.015532312 0.015671640 0.016320701 0.017256222 0.017558576 0.018067403 0.018476737 0.019712645 0.020237528 0.020715392 0.022124657 0.022590948 0.023246629 0.023845535 0.023951203 0.025033592 0.026073892 0.026474499 0.026737874 0.027762033 0.028173066 0.029991275 0.030438921 0.031882572 0.032454040 0.032725143 0.034949737 0.038549887 0.038713327 0.040677126 0.041066679 0.044339923 0.045163941 0.045315885 0.045827087 0.047984890 0.049670294 0.051374581 0.051563019 0.051819360 0.052275024 0.052332686 0.052553865 0.052696291 0.054074065 0.054811032 0.055459090 0.056495235 0.056877046 0.057144378 0.057754129 0.058621206 0.059215525 0.059576072 0.060660431 0.061259789 0.061635127 0.062568130 0.064103183 0.064577863 0.065073819 0.066127721 0.067650869 0.068009367 0.068525445 0.068804344 0.071388042 0.072385065 0.072807513 0.076519747 0.078965137 0.080834581 0.080953217 0.082816164 0.084110536 0.087646060 0.088604894 0.089565914 0.091063146 0.092867479 0.094189695 0.095318852 0.095762783 0.096673822 0.097770307 0.098887776 0.099748838 0.101192754 0.101469298 0.102795380 0.102998138 0.104053014 0.106990267 0.108590416 0.109506690 0.110122462 0.111622629 0.112420131 0.113114356 0.114650264 0.116420748 0.116661014 0.117429042 0.117834190 0.122180406 0.124269596 0.127249901 0.127525382 0.127910215 0.129592145 0.131377058 0.133093013 0.134926376 0.135857180 0.137130633 0.142333192 0.144565216 0.145340284 0.146129067 0.151034915 0.152984392 0.154075242 0.160098181 0.165826465 0.170715704 0.174582903 0.176728038 0.180726886 0.183375109 0.186069783 0.187720903 0.188861555 0.197069486 0.199791368 0.201856423 0.205368974 0.205909963 0.207150423 0.209078104 0.211408947 0.212756744 0.213154061 0.216122861 0.217881439 0.221334539 0.224969359 0.231542249 0.232751825 0.234002523 0.235380715 0.240020550 0.245440698 0.249519181 0.254837652 0.255444065 0.256968691 0.260655070 0.271384755 0.278401713 0.291069111 0.297527430 0.298873362 0.300342092 0.305630961 0.306593061 0.307553528 0.317842745 0.321001209 0.324932906 0.327689601 0.329505373 0.346907059 0.351081343 0.355263371 0.357463150 0.359339423 0.363885239 0.383068161 0.399139020 0.406004071 0.427763846 0.429848435 0.430830253 0.445713045 0.458214455 0.464511922 0.466033888 0.477887152 0.484181750 0.496906171 0.498044013 0.509436540 0.514506776 0.543055537 0.565474404 0.567145658 0.583345550 0.590532878 0.605205982 0.640667000 0.644679633 0.665556369 0.673779091 0.681390759 0.687960519 0.691931381 0.699192272 0.704243347 0.714948817 0.722844791 0.734162891 0.737638164 0.740487951 0.750707574 0.771583475 0.775914613 0.803020856 0.817265274 0.820153698 0.820924048 0.831667652 0.840413437 0.843358607 0.846692193 0.849957283 0.858448681 0.864532905 0.867352331 0.872767405 0.874541194 0.882197726 0.884883823 0.890862235 0.893814196 0.896400317 0.916138908 0.918462789 0.924092061 0.931038807 0.936376999 0.949302303 0.954108668 0.959027580 0.969594934 0.979020105 0.981791099 0.997942039 1.007660235 1.014433162 1.038094004 1.048243453 1.055280726 1.057400723 1.076151573 1.086515261 1.096907684 1.110118030 1.110780996 1.116379521 1.122474288 1.123446561 1.134504333 1.143912741 1.161273927 1.169805383 1.172923120 1.175764985 1.200536172 1.214082253 1.220621766 1.247312098 1.295072098 1.295897822 1.314052775 1.322662821 1.326301585 1.327162336 1.330146632 1.334530377 1.341046911 1.346092831 1.362412093 1.378793462 1.380903934 1.381391374 1.389954595 1.491234111 1.557512068 1.671864382 1.897114035</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">99</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93003087" y3="-0.9479938" z3="-0.72651226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55991959" y3="-1.937176" z3="-1.69800704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04025561" y3="-0.9874566" z3="-1.53844918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72836273" y3="1.47581578" z3="-1.13893251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29648135" y3="0.31403198" z3="-0.524118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59609655" y3="2.71838191" z3="-1.08331751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96419785" y3="2.7282171" z3="-0.87583458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35919784" y3="4.97346227" z3="-0.28673505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76426969" y3="3.8291549" z3="-0.76310413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74139687" y3="5.84474143" z3="-0.04737628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="1.99972139" y3="1.58730719" z3="-1.56099081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18588547" y3="0.3640473" z3="0.26821804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72106563" y3="0.35163047" z3="-0.49885995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66683034" y3="0.67097445" z3="0.4952746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6476053" y3="-0.89219729" z3="-1.35612049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13267805" y3="-2.53630959" z3="-1.21373934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.35953462" y3="-5.57244049" z3="-6.0885927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.02922846" y3="-5.13349874" z3="-5.14285427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17235643" y3="-3.97991299" z3="-2.74169495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.0194405" y3="-3.75322405" z3="-4.99252124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.63649839" y3="-5.95504351" z3="-4.08312395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22431681" y3="-5.37221235" z3="-2.89177131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60047895" y3="-3.14412941" z3="-3.79830187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.33206878" y3="-3.09018682" z3="-5.80297351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66693481" y3="-7.04352315" z3="-4.17629615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96178745" y3="-6.00288524" z3="-2.03823458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70563498" y3="-3.42719859" z3="-1.52237703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33613176" y3="-3.90330854" z3="-0.83153203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68375999" y3="-4.89369386" z3="-1.13646757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43941335" y3="-3.63133304" z3="0.61871726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.60869166" y3="-3.22765692" z3="3.38323406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.84576419" y3="-4.67343146" z3="1.46236497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1348228" y3="-2.38269163" z3="1.17015627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21772584" y3="-2.18331613" z3="2.54442572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.92163837" y3="-4.47403983" z3="2.83898723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.06427616" y3="-5.65979069" z3="1.04277614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15590867" y3="-1.5381677" z3="0.54411094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03235565" y3="-1.19720652" z3="2.94498768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.20569453" y3="-5.30454403" z3="3.49092736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.66157834" y3="-3.07529719" z3="4.46517343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.59181646" y3="-1.80836069" z3="-3.76918512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.62513662" y3="-1.39827945" z3="-2.85983209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.2872208" y3="3.69812721" z3="-0.8497726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06059031" y3="-2.98514177" z3="-1.7632556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90834473" y3="-3.13599694" z3="-0.66208177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11211444" y3="-2.25477947" z3="0.26186048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79465202" y3="-0.66263913" z3="0.48721347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.41471983" y3="-0.07648344" z3="-1.17505356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50388075" y3="0.39219003" z3="1.29764345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23182899" y3="-0.9769664" z3="1.64408157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.450965" y3="-4.32745114" z3="-0.4563206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.24125995" y3="-4.53812577" z3="0.70416353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.62108691" y3="0.36690651" z3="-1.79398885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19285467" y3="0.69758359" z3="-1.02903095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.87559584" y3="-0.89839727" z3="-1.74470248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.55611699" y3="0.49475765" z3="0.73904883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25573655" y3="-0.01011692" z3="2.29195507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.93243779" y3="1.40299066" z3="1.43467697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67409775" y3="-0.0127978" z3="1.95206047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.029194" y3="-1.57200134" z3="1.16325338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.90215949" y3="-1.50529345" z3="2.55540985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.14887326" y3="-3.91292469" z3="0.67539252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.66611067" y3="-4.31616393" z3="1.616826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.52078559" y3="-5.6000936" z3="0.67884439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33349014" y3="-2.18451702" z3="-0.1574073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16990358" y3="-3.30854511" z3="-0.9795837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52349249" y3="-4.4482679" z3="-0.51545359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.03845679" y3="-4.45610128" z3="0.78654914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.22447361" y3="-3.37701197" z3="1.64583497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8705617" y3="-2.24465605" z3="1.16742984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50223217" y3="-3.27255134" z3="-2.02046141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36041689" y3="-5.30645283" z3="-1.16769052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26525419" y3="-5.60854689" z3="1.25425265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.8358064" y3="-3.42325107" z3="2.66396287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.99194029" y3="-1.38196978" z3="1.8233834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48763679" y3="3.98278597" z3="0.28412877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86643372" y3="3.81753556" z3="0.26769905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46934107" y3="3.37596591" z3="-0.90736716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.73313905" y3="3.1079253" z3="-2.06166019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.35177137" y3="3.25738384" z3="-2.01928429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00148419" y3="4.30447217" z3="1.20209402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47464326" y3="4.01707317" z3="1.14943899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.91643742" y3="3.1602235" z3="-0.92599894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.24122107" y3="2.77155532" z3="-2.96465912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24344999" y3="3.01759555" z3="-2.90020139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1293375" y3="-5.75509844" z3="2.44801874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78653758" y3="-6.34624246" z3="0.41255194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45980016" y3="3.0664524" z3="-2.00408425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49169856" y3="3.06732223" z3="0.14173414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51670986" y3="0.16774902" z3="-2.21116112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.83846019" y3="1.40967339" z3="-2.04198103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.63100981" y3="0.09587457" z3="-3.09230225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.03987948" y3="1.19670906" z3="-3.80353802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.14970581" y3="-0.86118442" z3="-3.20461924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.89320163" y3="1.12821991" z3="-4.48404418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.26984007" y3="2.52421976" z3="-2.81425198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.34037427" y3="2.42031919" z3="-3.66964277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73271835" y3="3.47126863" z3="-2.7294509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.65027119" y3="3.28898607" z3="-4.25746072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57061872" y3="3.90316661" z3="-0.32100466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7583378" y3="5.04580735" z3="-0.06242618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9494455" y3="3.96813536" z3="0.02693318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49535808" y3="5.11580496" z3="0.549668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57925485" y3="3.08834727" z3="-0.1175172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55720838" y3="5.13955581" z3="0.81045774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35485573" y3="6.22335038" z3="0.46718599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69508776" y3="6.2640712" z3="0.76136384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72018069" y3="7.09627855" z3="0.64801996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14280356" y3="7.17307164" z3="1.17255702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24902332" y3="-3.92152387" z3="-2.93893713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49487192" y3="-4.94776823" z3="-2.62798651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.06860699" y3="-3.56054803" z3="-3.58739037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.33585579" y3="-3.95261918" z3="-3.55442355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.55925484" y3="-1.61122206" z3="-2.11792048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.26217791" y3="-1.09741086" z3="-2.79884628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.38322323" y3="-0.96891238" z3="-1.23959379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.60217048" y3="-1.686273" z3="-2.65667514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.93,-.948,-.7265;6.5599,-1.9372,-1.698;6.0403,-.9875,-1.5384;4.7284,1.4758,-1.1389;4.2965,.314,-.5241;2.5961,2.7184,-1.0833;3.9642,2.7282,-.8758;2.3592,4.9735,-.2867;1.7643,3.8292,-.7631;1.7414,5.8447,-.0474;1.9997,1.5873,-1.561;3.1859,.364,.2682;1.7211,.3516,-.4989;.6668,.671,.4953;1.6476,-.8922,-1.3561;1.1327,-2.5363,-1.2137;2.3595,-5.5724,-6.0886;2.0292,-5.1335,-5.1429;1.1724,-3.9799,-2.7417;2.0194,-3.7532,-4.9925;1.6365,-5.955,-4.0831;1.2243,-5.3722,-2.8918;1.6005,-3.1441,-3.7983;2.3321,-3.0902,-5.803;1.6669,-7.0435,-4.1763;.9618,-6.0029,-2.0382;.7056,-3.4272,-1.5224;-.3361,-3.9033,-.8315;-.6838,-4.8937,-1.1365;-.4394,-3.6313,.6187;-.6087,-3.2277,3.3832;-.8458,-4.6734,1.4624;-.1348,-2.3827,1.1702;-.2177,-2.1833,2.5444;-.9216,-4.474,2.839;-1.0643,-5.6598,1.0428;.1559,-1.5382,.5441;.0324,-1.1972,2.945;-1.2057,-5.3045,3.4909;-.6616,-3.0753,4.4652;1.5918,-1.8084,-3.7692;1.6251,-1.3983,-2.8598;.2872,3.6981,-.8498;-2.0606,-2.9851,-1.7633;-2.9083,-3.136,-.6621;-3.1121,-2.2548,.2619;-3.7947,-.6626,.4872;-4.4147,-.0765,-1.1751;-2.5039,.3922,1.2976;-5.2318,-.977,1.6441;-3.451,-4.3275,-.4563;-4.2413,-4.5381,.7042;-3.6211,.3669,-1.794;-5.1929,.6976,-1.029;-4.8756,-.8984,-1.7447;-1.5561,.4948,.739;-2.2557,-.0101,2.292;-2.9324,1.403,1.4347;-5.6741,-.0128,1.9521;-6.0292,-1.572,1.1633;-4.9022,-1.5053,2.5554;-5.1489,-3.9129,.6754;-3.6661,-4.3162,1.6168;-4.5208,-5.6001,.6788;4.3335,-2.1845,-.1574;4.1699,-3.3085,-.9796;3.5235,-4.4483,-.5155;3.0385,-4.4561,.7865;3.2245,-3.377,1.6458;3.8706,-2.2447,1.1674;4.5022,-3.2726,-2.0205;3.3604,-5.3065,-1.1677;2.2653,-5.6085,1.2543;2.8358,-3.4233,2.664;3.9919,-1.382,1.8234;-.4876,3.9828,.2841;-1.8664,3.8175,.2677;-2.4693,3.376,-.9074;-1.7331,3.1079,-2.0617;-.3518,3.2574,-2.0193;.0015,4.3045,1.2021;-2.4746,4.0171,1.1494;-3.9164,3.1602,-.926;-2.2412,2.7716,-2.9647;.2434,3.0176,-2.9002;2.1293,-5.7551,2.448;1.7865,-6.3462,.4126;-4.4598,3.0665,-2.0041;-4.4917,3.0673,.1417;6.5167,.1677,-2.2112;5.8385,1.4097,-2.042;7.631,.0959,-3.0923;8.0399,1.1967,-3.8035;8.1497,-.8612,-3.2046;8.8932,1.1282,-4.484;6.2698,2.5242,-2.8143;7.3404,2.4203,-3.6696;5.7327,3.4713,-2.7295;7.6503,3.289,-4.2575;4.5706,3.9032,-.321;3.7583,5.0458,-.0624;5.9494,3.9681,.0269;6.4954,5.1158,.5497;6.5793,3.0883,-.1175;7.5572,5.1396,.8105;4.3549,6.2234,.4672;5.6951,6.2641,.7614;3.7202,7.0963,.648;6.1428,7.1731,1.1726;-2.249,-3.9215,-2.9389;-2.4949,-4.9478,-2.628;-3.0686,-3.5605,-3.5874;-1.3359,-3.9526,-3.5544;-1.5593,-1.6112,-2.1179;-2.2622,-1.0974,-2.7988;-1.3832,-.9689,-1.2396;-.6022,-1.6863,-2.6567;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662466192713</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007222569467 0.000992883240 0.020407015354 0.005338758102</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054371546 -0.004440126 0.000157953 0.000247018 0.000338882 0.000359482 0.000370623 0.000427160 0.000534802 0.000647859 0.000767001 0.000819798 0.000964174 0.001090115 0.001245053 0.001255727 0.001275350 0.001397364 0.001514014 0.001661636 0.001774303 0.002085902 0.002224177 0.002613656 0.002963260 0.003210793 0.003637153 0.003722960 0.003820407 0.004369568 0.004755559 0.004921183 0.005096471 0.005563134 0.005839582 0.005922028 0.006519498 0.006832117 0.007027634 0.007499243 0.007814700 0.008497576 0.009202616 0.009244705 0.009607461 0.010238255 0.010499426 0.011538144 0.012690988 0.012961833 0.013151061 0.014375697 0.014454942 0.014880469 0.015182643 0.015538003 0.015673439 0.016326084 0.017318758 0.017588026 0.018067457 0.018595596 0.019870455 0.020249423 0.020820604 0.022140588 0.022590942 0.023246376 0.023855148 0.023976597 0.025056039 0.026077782 0.026475966 0.026737601 0.027764739 0.028194332 0.029991869 0.030439000 0.031902357 0.032480631 0.032727628 0.034948897 0.038546491 0.038713752 0.040681490 0.041066827 0.044370509 0.045162451 0.045313968 0.045829321 0.047984046 0.049670273 0.051375252 0.051562869 0.051819631 0.052274963 0.052333025 0.052554384 0.052699734 0.054074416 0.054887606 0.055459436 0.056495190 0.056877571 0.057146175 0.057755118 0.058621427 0.059219868 0.059675647 0.060661538 0.061303531 0.061636827 0.062574502 0.064153188 0.064578688 0.065098965 0.066128554 0.067672129 0.068079345 0.068518978 0.068941302 0.071516302 0.072385526 0.072816125 0.076522607 0.078984824 0.080835140 0.080963127 0.082833103 0.084097676 0.087783843 0.088634059 0.089565990 0.091066802 0.092867488 0.094189812 0.095319160 0.095763644 0.096685031 0.097805093 0.098887164 0.099750799 0.101197840 0.101519096 0.102852382 0.103009991 0.104062547 0.107046502 0.108857957 0.109651821 0.110456730 0.111639734 0.112626274 0.113121001 0.114652245 0.116439492 0.116974585 0.117525290 0.118424299 0.122195763 0.124519020 0.127249701 0.127740916 0.128091735 0.129609016 0.133004097 0.133602102 0.135856222 0.136039870 0.137142806 0.142440951 0.144581487 0.145697162 0.146219600 0.151073614 0.153003541 0.154221838 0.160097757 0.165837813 0.170721088 0.174583599 0.176741032 0.180726946 0.183377646 0.186086925 0.187724476 0.188871819 0.197090772 0.200369622 0.201858315 0.205369166 0.205925907 0.207150475 0.209082983 0.211564166 0.212814248 0.213171297 0.216176498 0.217906750 0.221349531 0.224979706 0.231542268 0.232751831 0.234003277 0.235380740 0.240350033 0.245633063 0.249519705 0.254850224 0.255445835 0.256992918 0.260961324 0.271384840 0.278412533 0.291165244 0.297677029 0.298873483 0.300347703 0.305631197 0.306601563 0.307553769 0.317845272 0.321017523 0.325100093 0.327695106 0.329530347 0.346928687 0.351101618 0.355300323 0.357471672 0.359339435 0.363886672 0.383085656 0.399313310 0.406007401 0.427753271 0.429867887 0.430875114 0.445712199 0.458214613 0.464517849 0.466040719 0.477887187 0.484176876 0.496976899 0.498044335 0.509620073 0.514553805 0.543057135 0.565474676 0.567147105 0.583347546 0.590594811 0.605222582 0.640667260 0.644687868 0.665556405 0.673808802 0.681396605 0.688030857 0.691936660 0.699201479 0.704243606 0.714948745 0.723239031 0.734382530 0.737652945 0.740488772 0.750707592 0.771583481 0.775915769 0.803023408 0.817269689 0.820175398 0.820933076 0.831746074 0.840413684 0.843416784 0.846749960 0.850060439 0.858492541 0.864624658 0.867352661 0.872921447 0.874810025 0.882302399 0.886630705 0.890862529 0.895805126 0.896610305 0.916182987 0.918469596 0.924141863 0.931046777 0.936529493 0.949354073 0.955852698 0.959378213 0.969632084 0.979205846 0.983099834 0.998230346 1.009818158 1.015184953 1.038384716 1.048440810 1.055283617 1.060622965 1.076166977 1.086632637 1.097798000 1.110143513 1.110854155 1.116396801 1.122474371 1.123447670 1.134504336 1.143914016 1.161276181 1.169805628 1.172923122 1.175765060 1.200536304 1.214095676 1.220629746 1.247313225 1.295084022 1.295912269 1.314102305 1.323439688 1.326302244 1.327162297 1.330146757 1.334531207 1.341047678 1.346093005 1.362412228 1.378793467 1.380903974 1.381393972 1.390116331 1.492129420 1.557516935 1.671864455 1.897214743</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">100</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93555539" y3="-0.94662716" z3="-0.72826494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56329016" y3="-1.93464148" z3="-1.70450286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04343817" y3="-0.98528157" z3="-1.54338305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73006788" y3="1.4768245" z3="-1.14049447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30092118" y3="0.31464633" z3="-0.52467001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59594423" y3="2.71612691" z3="-1.08231021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96432873" y3="2.72806062" z3="-0.87632408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35674009" y3="4.97056558" z3="-0.28391006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76249699" y3="3.82588832" z3="-0.7604911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73796856" y3="5.84075776" z3="-0.04398128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00150048" y3="1.58377109" z3="-1.55915602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19138531" y3="0.3632116" z3="0.26922479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72577516" y3="0.34789668" z3="-0.49641777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67183364" y3="0.66616445" z3="0.49827794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6534632" y3="-0.89669876" z3="-1.35294369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13553885" y3="-2.54181571" z3="-1.21091276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.35426016" y3="-5.58104696" z3="-6.08630265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.02546787" y3="-5.1412084" z3="-5.14046237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17193783" y3="-3.98527193" z3="-2.73935142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.02090671" y3="-3.76097425" z3="-4.98960556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62952788" y3="-5.96167101" z3="-4.08111437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21912788" y3="-5.37771328" z3="-2.88971015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60387806" y3="-3.15074148" z3="-3.79530118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.33634394" y3="-3.09883654" z3="-5.79967943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65592506" y3="-7.05019968" z3="-4.17469033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95401735" y3="-6.00771779" z3="-2.03649812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70582433" y3="-3.43110763" z3="-1.52033264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33771839" y3="-3.90446304" z3="-0.8309169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68879798" y3="-4.89299754" z3="-1.13710546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44264303" y3="-3.63308178" z3="0.61917809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.61577455" y3="-3.23173769" z3="3.38376243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.85572446" y3="-4.67400527" z3="1.46091406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13259603" y3="-2.38698885" z3="1.17263178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21719767" y3="-2.18895593" z3="2.54700062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.93390954" y3="-4.4756638" z3="2.83742915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.07819568" y3="-5.65846723" z3="1.03961261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.16367115" y3="-1.54342169" z3="0.54808847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0373197" y3="-1.20493444" z3="2.94929547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.22381109" y3="-5.3050971" z3="3.48787145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.67056056" y3="-3.08005417" z3="4.46568515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.60090852" y3="-1.81503268" z3="-3.76563346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.63341382" y3="-1.40488092" z3="-2.85605454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.28541428" y3="3.69430288" z3="-0.84639758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05966916" y3="-2.978934" z3="-1.76521523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90893381" y3="-3.13249149" z3="-0.66607851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1133563" y3="-2.25389308" z3="0.26012462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79169858" y3="-0.66110809" z3="0.48658959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.41290996" y3="-0.07388313" z3="-1.17369756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50171733" y3="0.3933707" z3="1.29357804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.2287323" y3="-0.97390224" z3="1.64301435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45372649" y3="-4.32421299" z3="-0.46487534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.24808275" y3="-4.53710742" z3="0.69219209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.61536388" y3="0.37485874" z3="-1.79054603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.18865287" y3="0.69640052" z3="-1.02417792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.86501098" y3="-0.90399752" z3="-1.75444293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.55136887" y3="0.49503625" z3="0.73640969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25609212" y3="-0.01021313" z3="2.29297968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.93170985" y3="1.40003112" z3="1.43511092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67401697" y3="-0.00974252" z3="1.95069326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02445774" y3="-1.56955763" z3="1.16239959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89977169" y3="-1.500049" z3="2.55640599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.15320807" y3="-3.9087327" z3="0.6639439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.67501499" y3="-4.32240119" z3="1.60710234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.53206975" y3="-5.59720629" z3="0.6609778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.34076039" y3="-2.18286578" z3="-0.15682454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17059935" y3="-3.30615685" z3="-0.97871814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52289041" y3="-4.44418629" z3="-0.51210554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0426482" y3="-4.45063113" z3="0.79170017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.23636256" y3="-3.37271565" z3="1.65087999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.88444142" y3="-2.24242521" z3="1.17029358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49834117" y3="-3.27055924" z3="-2.02109966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35515674" y3="-5.30222332" z3="-1.16336733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26590589" y3="-5.60003024" z3="1.2614972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.85195299" y3="-3.41820356" z3="2.67063139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.01234731" y3="-1.38075452" z3="1.82647124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49119118" y3="3.98551045" z3="0.28143504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86980073" y3="3.81960828" z3="0.26461155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46970806" y3="3.37091297" z3="-0.90495119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.73057055" y3="3.09423184" z3="-2.05040454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.35075576" y3="3.2461132" z3="-2.01097782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00461493" y3="4.30219857" z3="1.20553809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47598955" y3="4.01734633" z3="1.15136007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.92068446" y3="3.16383729" z3="-0.9276386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23878869" y3="2.75752581" z3="-2.95496646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24279204" y3="3.00765842" z3="-2.89706041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12753654" y3="-5.74264311" z3="2.45545905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7869512" y3="-6.3391446" z3="0.42118385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.46887275" y3="3.07342635" z3="-2.0056053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49397132" y3="3.07343537" z3="0.14147794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51709087" y3="0.17049298" z3="-2.21722125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8383758" y3="1.41190792" z3="-2.04581775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6290327" y3="0.09981064" z3="-3.10142537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.0353325" y3="1.2013082" z3="-3.81310634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.14805288" y3="-0.85684465" z3="-3.21564186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.88685178" y3="1.13369306" z3="-4.49590249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.26720247" y3="2.52723422" z3="-2.81836641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.33561498" y3="2.4245043" z3="-3.6765258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.72978903" y3="3.47393635" z3="-2.73144188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.64362312" y3="3.29377242" z3="-4.26441673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56962174" y3="3.9034037" z3="-0.32114538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75596235" y3="5.04457798" z3="-0.06054107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9487033" y3="3.96994372" z3="0.02542648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49331788" y3="5.1177491" z3="0.54927839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5796558" y3="3.09125191" z3="-0.12091405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5554632" y3="5.1427155" z3="0.80900129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35098024" y3="6.22226232" z3="0.47034595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69135982" y3="6.26449859" z3="0.76357881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71486329" y3="7.09388312" z3="0.65323302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13796675" y3="7.17357411" z3="1.17578796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24625958" y3="-3.91340447" z3="-2.94387487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49200802" y3="-4.94120832" z3="-2.63396627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.06575166" y3="-3.55129529" z3="-3.59428898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.33234732" y3="-3.94355416" z3="-3.55858173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.55306606" y3="-1.60638557" z3="-2.1142105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.25136938" y3="-1.08886394" z3="-2.79541521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.37990379" y3="-0.9691978" z3="-1.23254197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.5901586" y3="-1.68351068" z3="-2.64670681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9356,-.9466,-.7283;6.5633,-1.9346,-1.7045;6.0434,-.9853,-1.5434;4.7301,1.4768,-1.1405;4.3009,.3146,-.5247;2.5959,2.7161,-1.0823;3.9643,2.7281,-.8763;2.3567,4.9706,-.2839;1.7625,3.8259,-.7605;1.738,5.8408,-.044;2.0015,1.5838,-1.5592;3.1914,.3632,.2692;1.7258,.3479,-.4964;.6718,.6662,.4983;1.6535,-.8967,-1.3529;1.1355,-2.5418,-1.2109;2.3543,-5.581,-6.0863;2.0255,-5.1412,-5.1405;1.1719,-3.9853,-2.7394;2.0209,-3.761,-4.9896;1.6295,-5.9617,-4.0811;1.2191,-5.3777,-2.8897;1.6039,-3.1507,-3.7953;2.3363,-3.0988,-5.7997;1.6559,-7.0502,-4.1747;.954,-6.0077,-2.0365;.7058,-3.4311,-1.5203;-.3377,-3.9045,-.8309;-.6888,-4.893,-1.1371;-.4426,-3.6331,.6192;-.6158,-3.2317,3.3838;-.8557,-4.674,1.4609;-.1326,-2.387,1.1726;-.2172,-2.189,2.547;-.9339,-4.4757,2.8374;-1.0782,-5.6585,1.0396;.1637,-1.5434,.5481;.0373,-1.2049,2.9493;-1.2238,-5.3051,3.4879;-.6706,-3.0801,4.4657;1.6009,-1.815,-3.7656;1.6334,-1.4049,-2.8561;.2854,3.6943,-.8464;-2.0597,-2.9789,-1.7652;-2.9089,-3.1325,-.6661;-3.1134,-2.2539,.2601;-3.7917,-.6611,.4866;-4.4129,-.0739,-1.1737;-2.5017,.3934,1.2936;-5.2287,-.9739,1.643;-3.4537,-4.3242,-.4649;-4.2481,-4.5371,.6922;-3.6154,.3749,-1.7905;-5.1887,.6964,-1.0242;-4.865,-.904,-1.7544;-1.5514,.495,.7364;-2.2561,-.0102,2.293;-2.9317,1.4,1.4351;-5.674,-.0097,1.9507;-6.0245,-1.5696,1.1624;-4.8998,-1.5,2.5564;-5.1532,-3.9087,.6639;-3.675,-4.3224,1.6071;-4.5321,-5.5972,.661;4.3408,-2.1829,-.1568;4.1706,-3.3062,-.9787;3.5229,-4.4442,-.5121;3.0426,-4.4506,.7917;3.2364,-3.3727,1.6509;3.8844,-2.2424,1.1703;4.4983,-3.2706,-2.0211;3.3552,-5.3022,-1.1634;2.2659,-5.6,1.2615;2.852,-3.4182,2.6706;4.0123,-1.3808,1.8265;-.4912,3.9855,.2814;-1.8698,3.8196,.2646;-2.4697,3.3709,-.905;-1.7306,3.0942,-2.0504;-.3508,3.2461,-2.011;.0046,4.3022,1.2055;-2.476,4.0173,1.1514;-3.9207,3.1638,-.9276;-2.2388,2.7575,-2.955;.2428,3.0077,-2.8971;2.1275,-5.7426,2.4555;1.787,-6.3391,.4212;-4.4689,3.0734,-2.0056;-4.494,3.0734,.1415;6.5171,.1705,-2.2172;5.8384,1.4119,-2.0458;7.629,.0998,-3.1014;8.0353,1.2013,-3.8131;8.1481,-.8568,-3.2156;8.8869,1.1337,-4.4959;6.2672,2.5272,-2.8184;7.3356,2.4245,-3.6765;5.7298,3.4739,-2.7314;7.6436,3.2938,-4.2644;4.5696,3.9034,-.3211;3.756,5.0446,-.0605;5.9487,3.9699,.0254;6.4933,5.1177,.5493;6.5797,3.0913,-.1209;7.5555,5.1427,.809;4.351,6.2223,.4703;5.6914,6.2645,.7636;3.7149,7.0939,.6532;6.138,7.1736,1.1758;-2.2463,-3.9134,-2.9439;-2.492,-4.9412,-2.634;-3.0658,-3.5513,-3.5943;-1.3323,-3.9436,-3.5586;-1.5531,-1.6064,-2.1142;-2.2514,-1.0889,-2.7954;-1.3799,-.9692,-1.2325;-.5902,-1.6835,-2.6467;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662454294777</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006319327088 0.000847384155 0.022697948172 0.005335897410</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054368348 -0.003558715 0.000160584 0.000258459 0.000337220 0.000357213 0.000372093 0.000425261 0.000542699 0.000647045 0.000771544 0.000820160 0.000968664 0.001090253 0.001244416 0.001255755 0.001275045 0.001397018 0.001514328 0.001661763 0.001779028 0.002094815 0.002228483 0.002613569 0.002962908 0.003215845 0.003642401 0.003723296 0.003857354 0.004369631 0.004784157 0.004951408 0.005099464 0.005598492 0.005839731 0.005929662 0.006521334 0.006841862 0.007025621 0.007522192 0.007832924 0.008571676 0.009200984 0.009252634 0.009666472 0.010237861 0.010628909 0.011559898 0.012692579 0.012963129 0.013180200 0.014406547 0.014470030 0.014879533 0.015204469 0.015540340 0.015685081 0.016337272 0.017371075 0.017656067 0.018067381 0.018590856 0.020036711 0.020247573 0.021071788 0.022138160 0.022593930 0.023247996 0.023861939 0.024102222 0.025206497 0.026106526 0.026475825 0.026749856 0.027765377 0.028193054 0.029996772 0.030438896 0.031918806 0.032495225 0.032736214 0.034953650 0.038558740 0.038719010 0.040681426 0.041068996 0.044378467 0.045188812 0.045313943 0.045831939 0.048023204 0.049670288 0.051397546 0.051570935 0.051819883 0.052276040 0.052335622 0.052554689 0.052713654 0.054076181 0.054911147 0.055460661 0.056495158 0.056877475 0.057147003 0.057757318 0.058621340 0.059220955 0.059720817 0.060662943 0.061358867 0.061644482 0.062598496 0.064186546 0.064579842 0.065139338 0.066134801 0.067688191 0.068099139 0.068567440 0.068931832 0.071542550 0.072385357 0.072819109 0.076523416 0.078986560 0.080840515 0.080962728 0.082832419 0.084224882 0.087775233 0.088643463 0.089566322 0.091066720 0.092867995 0.094190205 0.095319590 0.095763624 0.096696222 0.097806652 0.098897384 0.099762136 0.101200476 0.101514850 0.102879291 0.103008954 0.104093808 0.107093327 0.108858608 0.109799132 0.110617034 0.111655566 0.112753432 0.113139469 0.114652915 0.116440766 0.117033559 0.117548402 0.118840912 0.122256527 0.124513467 0.127283739 0.127745278 0.128223768 0.129618530 0.133070070 0.134269950 0.135857212 0.137119381 0.138188718 0.142636037 0.144604963 0.146020920 0.146992912 0.151112428 0.153011501 0.154434786 0.160099287 0.165836867 0.170732278 0.174585168 0.176785408 0.180727237 0.183393857 0.186100601 0.187725510 0.188904650 0.197138130 0.200589531 0.201860406 0.205373295 0.205982073 0.207150662 0.209091179 0.211730255 0.212828524 0.213233687 0.216186157 0.217907243 0.221384706 0.224979435 0.231542237 0.232752520 0.234017125 0.235385728 0.240573759 0.245674813 0.249519871 0.254875456 0.255447680 0.257005056 0.261052566 0.271384859 0.278448379 0.291187120 0.297692550 0.298873851 0.300347943 0.305631273 0.306614068 0.307553874 0.317851528 0.321018693 0.325110590 0.327708562 0.329529544 0.346928258 0.351101766 0.355301993 0.357511102 0.359339912 0.363887658 0.383096718 0.399345405 0.406026283 0.427969344 0.429873661 0.430987905 0.445727176 0.458221546 0.464518957 0.466046381 0.477887211 0.484233344 0.496986813 0.498044487 0.509726214 0.514552680 0.543058101 0.565476925 0.567148440 0.583347927 0.590639445 0.605231938 0.640683377 0.644689205 0.665557991 0.673816024 0.681397338 0.688034962 0.691936580 0.699218953 0.704243600 0.714951573 0.723241125 0.734400272 0.737654664 0.740540095 0.750707591 0.771583482 0.775916302 0.803115692 0.817270681 0.820183757 0.820947782 0.831796148 0.840414641 0.843509978 0.846806368 0.850216570 0.858559111 0.864905447 0.867352773 0.872961316 0.874996249 0.882303093 0.888148902 0.890863251 0.896300860 0.898449035 0.916190812 0.918492867 0.924183145 0.931049002 0.936731661 0.949375815 0.956806730 0.959786881 0.969695684 0.979204688 0.983630198 0.998379363 1.010982824 1.016148894 1.038596880 1.048536095 1.055284218 1.063387797 1.076224837 1.086731179 1.098287811 1.110179391 1.111008352 1.116419817 1.122475301 1.123452072 1.134507446 1.143939558 1.161279693 1.169808558 1.172923347 1.175777692 1.200536615 1.214250053 1.220658028 1.247313048 1.295091826 1.295912904 1.314112062 1.323729719 1.326302208 1.327173992 1.330147595 1.334531297 1.341050072 1.346098735 1.362413138 1.378793775 1.380903980 1.381394555 1.390140829 1.492363819 1.557523482 1.671864702 1.897747826</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">101</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94243039" y3="-0.94549038" z3="-0.72901004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56803847" y3="-1.9322742" z3="-1.71000048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04800073" y3="-0.98327831" z3="-1.54727173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73316642" y3="1.4775475" z3="-1.1412439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30669548" y3="0.31502654" z3="-0.52438355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59699864" y3="2.71262654" z3="-1.08045642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96565888" y3="2.72737354" z3="-0.87616126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35441635" y3="4.96643872" z3="-0.28197461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76198071" y3="3.8205111" z3="-0.75780863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7343661" y3="5.83567524" z3="-0.04172704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00372513" y3="1.57922123" z3="-1.55670359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19823945" y3="0.36230408" z3="0.27113779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73164748" y3="0.34335827" z3="-0.49270251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67824579" y3="0.66056888" z3="0.50305674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66068242" y3="-0.90220567" z3="-1.34791107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13865652" y3="-2.54754595" z3="-1.20774066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.34823301" y3="-5.58799916" z3="-6.08528562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.02126828" y3="-5.14767301" z3="-5.1390513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17212954" y3="-3.99037985" z3="-2.73720757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.02262613" y3="-3.76759125" z3="-4.9869096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.6218954" y3="-5.96751824" z3="-4.08049392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.2137915" y3="-5.38289801" z3="-2.8886706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60806137" y3="-3.15657316" z3="-3.79211331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.34095962" y3="-3.10607292" z3="-5.79636529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64381016" y3="-7.05606832" z3="-4.17505564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94567353" y3="-6.01264466" z3="-2.03619647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70680919" y3="-3.4354928" z3="-1.51827412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33809791" y3="-3.90717219" z3="-0.83007537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69270563" y3="-4.89383029" z3="-1.13833279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44544597" y3="-3.63608306" z3="0.61962851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.62479666" y3="-3.23460605" z3="3.38375902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.8676517" y3="-4.67473199" z3="1.45959351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12982494" y3="-2.39175733" z3="1.17441891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21760105" y3="-2.19361964" z3="2.54866419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.94891706" y3="-4.476534" z3="2.83594832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.09573307" y3="-5.65714165" z3="1.03681029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.17244322" y3="-1.54930822" z3="0.55088786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04068752" y3="-1.21050305" z3="2.95189323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.24650903" y3="-5.30419273" z3="3.48521451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.68217851" y3="-3.0831067" z3="4.46559154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.61138637" y3="-1.82099908" z3="-3.76128746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.64118072" y3="-1.41134754" z3="-2.85095236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.28522334" y3="3.68677682" z3="-0.84292473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05743456" y3="-2.97500956" z3="-1.76719235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90938854" y3="-3.12884746" z3="-0.67044345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11243308" y3="-2.25232229" z3="0.2583254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78994725" y3="-0.66002656" z3="0.48767537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.41016007" y3="-0.07546345" z3="-1.17541934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49615925" y3="0.39145498" z3="1.29441071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22560888" y3="-0.97208254" z3="1.64534407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45891412" y3="-4.31905061" z3="-0.47547341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.25601025" y3="-4.53545131" z3="0.67879623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.61752509" y3="0.36987945" z3="-1.79331781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19033862" y3="0.69356245" z3="-1.02684234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.86397552" y3="-0.9018105" z3="-1.74542055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.54772793" y3="0.49207383" z3="0.73568801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25041849" y3="-0.01735928" z3="2.29073885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91954848" y3="1.40536618" z3="1.43174612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66611114" y3="-0.00636903" z3="1.95337555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02390066" y3="-1.56557962" z3="1.16698841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.8964104" y3="-1.50139273" z3="2.557172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.15970113" y3="-3.90485928" z3="0.65177686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.68361966" y3="-4.3258094" z3="1.59592782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.54237489" y3="-5.59529926" z3="0.64260893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3491698" y3="-2.18132731" z3="-0.15516504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1726894" y3="-3.30399245" z3="-0.97651244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52268911" y3="-4.43974492" z3="-0.50767696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0463973" y3="-4.44433816" z3="0.79762127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.24746992" y3="-3.36746557" z3="1.65644269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.89824975" y3="-2.23967579" z3="1.17381483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49673194" y3="-3.26922949" z3="-2.02009649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34971642" y3="-5.29721538" z3="-1.15815078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26553211" y3="-5.59029112" z3="1.26941799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.86638762" y3="-3.41167412" z3="2.67747857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.03199887" y3="-1.37872608" z3="1.8298709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49041891" y3="3.97917546" z3="0.28812992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87051714" y3="3.81896282" z3="0.26909199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.47310282" y3="3.37255821" z3="-0.90363684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.73457287" y3="3.09250398" z3="-2.051503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.35336357" y3="3.24021452" z3="-2.01071052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00167103" y3="4.3023428" z3="1.20684226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47970045" y3="4.0248086" z3="1.14742249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.92037846" y3="3.16049115" z3="-0.92201633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.24496002" y3="2.75557656" z3="-2.95618521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24097568" y3="2.99677512" z3="-2.89274963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12341081" y3="-5.72815983" z3="2.46352917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78723525" y3="-6.33131874" z3="0.430454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.46239634" y3="3.06737429" z3="-2.00029722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49642412" y3="3.06755321" z3="0.14685026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.51885832" y3="0.1730715" z3="-2.2222919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.83966142" y3="1.41394329" z3="-2.0487916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.62844216" y3="0.10365443" z3="-3.10960394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.03214043" y3="1.20583497" z3="-3.82179512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.14780789" y3="-0.85257649" z3="-3.22583497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.88186881" y3="1.13913562" z3="-4.50696055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.26578407" y3="2.5300349" z3="-2.8217742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.33212284" y3="2.42854917" z3="-3.68268558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7279012" y3="3.47627809" z3="-2.73300902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.63815308" y3="3.29839618" z3="-4.27081956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56936323" y3="3.90367411" z3="-0.32145424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75376153" y3="5.04312862" z3="-0.05970062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94863163" y3="3.97259568" z3="0.02399327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49146391" y3="5.12094798" z3="0.54840371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58101982" y3="3.09520212" z3="-0.12333992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55357611" y3="5.14773331" z3="0.80765541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34715475" y3="6.22153888" z3="0.47150331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68759667" y3="6.26597719" z3="0.7640343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70970612" y3="7.09184206" z3="0.65537998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13279069" y3="7.17543589" z3="1.17692769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24307926" y3="-3.90563955" z3="-2.94889221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48913913" y3="-4.93406141" z3="-2.643865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.06190232" y3="-3.54182468" z3="-3.59863354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32868712" y3="-3.93380309" z3="-3.56285842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.54677888" y3="-1.60229165" z3="-2.11085467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2440468" y3="-1.08281666" z3="-2.79347467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.37373337" y3="-0.96353775" z3="-1.22842681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.59022316" y3="-1.67732706" z3="-2.6459141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9424,-.9455,-.729;6.568,-1.9323,-1.71;6.048,-.9833,-1.5473;4.7332,1.4775,-1.1412;4.3067,.315,-.5244;2.597,2.7126,-1.0805;3.9657,2.7274,-.8762;2.3544,4.9664,-.282;1.762,3.8205,-.7578;1.7344,5.8357,-.0417;2.0037,1.5792,-1.5567;3.1982,.3623,.2711;1.7316,.3434,-.4927;.6782,.6606,.5031;1.6607,-.9022,-1.3479;1.1387,-2.5475,-1.2077;2.3482,-5.588,-6.0853;2.0213,-5.1477,-5.1391;1.1721,-3.9904,-2.7372;2.0226,-3.7676,-4.9869;1.6219,-5.9675,-4.0805;1.2138,-5.3829,-2.8887;1.6081,-3.1566,-3.7921;2.341,-3.1061,-5.7964;1.6438,-7.0561,-4.1751;.9457,-6.0126,-2.0362;.7068,-3.4355,-1.5183;-.3381,-3.9072,-.8301;-.6927,-4.8938,-1.1383;-.4454,-3.6361,.6196;-.6248,-3.2346,3.3838;-.8677,-4.6747,1.4596;-.1298,-2.3918,1.1744;-.2176,-2.1936,2.5487;-.9489,-4.4765,2.8359;-1.0957,-5.6571,1.0368;.1724,-1.5493,.5509;.0407,-1.2105,2.9519;-1.2465,-5.3042,3.4852;-.6822,-3.0831,4.4656;1.6114,-1.821,-3.7613;1.6412,-1.4113,-2.851;.2852,3.6868,-.8429;-2.0574,-2.975,-1.7672;-2.9094,-3.1288,-.6704;-3.1124,-2.2523,.2583;-3.7899,-.66,.4877;-4.4102,-.0755,-1.1754;-2.4962,.3915,1.2944;-5.2256,-.9721,1.6453;-3.4589,-4.3191,-.4755;-4.256,-4.5355,.6788;-3.6175,.3699,-1.7933;-5.1903,.6936,-1.0268;-4.864,-.9018,-1.7454;-1.5477,.4921,.7357;-2.2504,-.0174,2.2907;-2.9195,1.4054,1.4317;-5.6661,-.0064,1.9534;-6.0239,-1.5656,1.167;-4.8964,-1.5014,2.5572;-5.1597,-3.9049,.6518;-3.6836,-4.3258,1.5959;-4.5424,-5.5953,.6426;4.3492,-2.1813,-.1552;4.1727,-3.304,-.9765;3.5227,-4.4397,-.5077;3.0464,-4.4443,.7976;3.2475,-3.3675,1.6564;3.8982,-2.2397,1.1738;4.4967,-3.2692,-2.0201;3.3497,-5.2972,-1.1582;2.2655,-5.5903,1.2694;2.8664,-3.4117,2.6775;4.032,-1.3787,1.8299;-.4904,3.9792,.2881;-1.8705,3.819,.2691;-2.4731,3.3726,-.9036;-1.7346,3.0925,-2.0515;-.3534,3.2402,-2.0107;.0017,4.3023,1.2068;-2.4797,4.0248,1.1474;-3.9204,3.1605,-.922;-2.245,2.7556,-2.9562;.241,2.9968,-2.8927;2.1234,-5.7282,2.4635;1.7872,-6.3313,.4305;-4.4624,3.0674,-2.0003;-4.4964,3.0676,.1469;6.5189,.1731,-2.2223;5.8397,1.4139,-2.0488;7.6284,.1037,-3.1096;8.0321,1.2058,-3.8218;8.1478,-.8526,-3.2258;8.8819,1.1391,-4.507;6.2658,2.53,-2.8218;7.3321,2.4285,-3.6827;5.7279,3.4763,-2.733;7.6382,3.2984,-4.2708;4.5694,3.9037,-.3215;3.7538,5.0431,-.0597;5.9486,3.9726,.024;6.4915,5.1209,.5484;6.581,3.0952,-.1233;7.5536,5.1477,.8077;4.3472,6.2215,.4715;5.6876,6.266,.764;3.7097,7.0918,.6554;6.1328,7.1754,1.1769;-2.2431,-3.9056,-2.9489;-2.4891,-4.9341,-2.6439;-3.0619,-3.5418,-3.5986;-1.3287,-3.9338,-3.5629;-1.5468,-1.6023,-2.1109;-2.244,-1.0828,-2.7935;-1.3737,-.9635,-1.2284;-.5902,-1.6773,-2.6459;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662431829798</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004471500030 0.000793647845 0.021239367313 0.005335931686</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054416137 -0.003157716 0.000165469 0.000245589 0.000331574 0.000348870 0.000371673 0.000427873 0.000539539 0.000641181 0.000767898 0.000819381 0.000969654 0.001088255 0.001243911 0.001255763 0.001275481 0.001396920 0.001514296 0.001667239 0.001774943 0.002095973 0.002232451 0.002614185 0.002968395 0.003257502 0.003648054 0.003725308 0.003913451 0.004373285 0.004809927 0.004950681 0.005109890 0.005594676 0.005845386 0.005926667 0.006521225 0.006849597 0.007038512 0.007518859 0.007837382 0.008597603 0.009206435 0.009251958 0.009675417 0.010263500 0.010716253 0.011604807 0.012698546 0.012971780 0.013192254 0.014419420 0.014493846 0.014879955 0.015217967 0.015541549 0.015699299 0.016338351 0.017385268 0.017731221 0.018067330 0.018628354 0.020093818 0.020254593 0.021230459 0.022138728 0.022599952 0.023251397 0.023872187 0.024239620 0.025401426 0.026148101 0.026478357 0.026780409 0.027765759 0.028209445 0.029999486 0.030439467 0.031923427 0.032495415 0.032752233 0.034953373 0.038565321 0.038720227 0.040682126 0.041079647 0.044597907 0.045187494 0.045318822 0.045834937 0.048043579 0.049670426 0.051417287 0.051583081 0.051820565 0.052278608 0.052346895 0.052559004 0.052796903 0.054089215 0.054909110 0.055479388 0.056495319 0.056878412 0.057147763 0.057760305 0.058621256 0.059221732 0.059731147 0.060692369 0.061392962 0.061706121 0.062602728 0.064199813 0.064579586 0.065172619 0.066141374 0.067710267 0.068097942 0.068667611 0.069138493 0.071546837 0.072386034 0.072821197 0.076526023 0.078988004 0.080850681 0.080965638 0.082836743 0.084364188 0.087805542 0.088643058 0.089566560 0.091070408 0.092876149 0.094190718 0.095319677 0.095774693 0.096703672 0.097806932 0.098937799 0.099782217 0.101221121 0.101561134 0.102892695 0.103026253 0.104134849 0.107152056 0.108878718 0.110039737 0.110640164 0.111683122 0.112794271 0.113184989 0.114653385 0.116441963 0.117081896 0.117583219 0.119062542 0.122471278 0.124528126 0.127342426 0.127753170 0.128352172 0.129621147 0.133105773 0.134495092 0.135860558 0.137125864 0.139214301 0.142760978 0.144609034 0.146053658 0.148421909 0.151110566 0.153014245 0.154672617 0.160102569 0.165844888 0.170768989 0.174586997 0.176920335 0.180735776 0.183414357 0.186137623 0.187740668 0.188966364 0.197176757 0.200574012 0.201860640 0.205382053 0.206057250 0.207152811 0.209096516 0.211827080 0.212959393 0.213425003 0.216186266 0.217911384 0.221425676 0.224984621 0.231542366 0.232752483 0.234063615 0.235424552 0.240772371 0.245673309 0.249521104 0.254910768 0.255452398 0.257006513 0.261072581 0.271385106 0.278545234 0.291186160 0.297702851 0.298879866 0.300350536 0.305631308 0.306646043 0.307553892 0.317858779 0.321018736 0.325129472 0.327714845 0.329562232 0.346935523 0.351106561 0.355304698 0.357545051 0.359340177 0.363887838 0.383148570 0.399347576 0.406051165 0.428354789 0.429873517 0.431050104 0.445742335 0.458305497 0.464519988 0.466094146 0.477887566 0.484343049 0.497003721 0.498044608 0.509821014 0.514568586 0.543060241 0.565480184 0.567151392 0.583348942 0.590652583 0.605234569 0.640697311 0.644689224 0.665560264 0.673815821 0.681400326 0.688036006 0.691937209 0.699221756 0.704243901 0.714954890 0.723284310 0.734662847 0.737655156 0.740692529 0.750707591 0.771583571 0.775916383 0.803311647 0.817271212 0.820184305 0.820965725 0.831815456 0.840431989 0.843694985 0.846814242 0.850403630 0.858632403 0.865434540 0.867352773 0.873027916 0.875015040 0.882303808 0.889129295 0.890883517 0.896309848 0.899928862 0.916192853 0.918655495 0.924204549 0.931049114 0.936943253 0.949434547 0.957254880 0.960051059 0.969792675 0.979371725 0.983645249 0.998434042 1.011313206 1.016749179 1.038683896 1.048597214 1.055284501 1.064853123 1.076298278 1.086784443 1.098579245 1.110197851 1.111125925 1.116437459 1.122477182 1.123458742 1.134515707 1.144011136 1.161288261 1.169815644 1.172923610 1.175830894 1.200536977 1.214641998 1.220867478 1.247315602 1.295101625 1.295921558 1.314115498 1.323778871 1.326307007 1.327245959 1.330148280 1.334531857 1.341050686 1.346100556 1.362414090 1.378794669 1.380906317 1.381396814 1.390813351 1.492548955 1.557534253 1.671864808 1.898842149</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">102</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95002316" y3="-0.94422064" z3="-0.72898482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57417402" y3="-1.92972097" z3="-1.71358075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05369617" y3="-0.98115936" z3="-1.54967604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73651805" y3="1.47845441" z3="-1.14189619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.31297781" y3="0.31557007" z3="-0.52383163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.59773929" y3="2.70979265" z3="-1.07937122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96673562" y3="2.72697007" z3="-0.87629324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35266164" y3="4.9636376" z3="-0.28145826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76121577" y3="3.81697491" z3="-0.75704953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73149552" y3="5.83213455" z3="-0.04109361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00630232" y3="1.57482625" z3="-1.55398335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.20553329" y3="0.36156709" z3="0.27325572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73813087" y3="0.33885085" z3="-0.48876318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.68513959" y3="0.65498745" z3="0.50776334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6684891" y3="-0.90754286" z3="-1.34288661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14016642" y3="-2.55368727" z3="-1.20502143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.34025382" y3="-5.59126778" z3="-6.08678734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.01548226" y3="-5.15119855" z3="-5.13969406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17082116" y3="-3.99460846" z3="-2.73583838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.02236828" y3="-3.77131486" z3="-4.98514884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.61315114" y3="-5.97118075" z3="-4.08245993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20765121" y3="-5.38699223" z3="-2.88950614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60979128" y3="-3.16087625" z3="-3.78943221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.3431781" y3="-3.1097997" z3="-5.79359561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63049289" y3="-7.05964493" z3="-4.17896513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93681542" y3="-6.01709603" z3="-2.0382052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70615142" y3="-3.43972497" z3="-1.51689713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34391993" y3="-3.9070321" z3="-0.83161262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69818503" y3="-4.89405964" z3="-1.13960836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45053525" y3="-3.63755772" z3="0.61877469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.63560947" y3="-3.23430674" z3="3.38244219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.87957684" y3="-4.67433268" z3="1.45797583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12963428" y3="-2.39486093" z3="1.17434509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22021046" y3="-2.19575744" z3="2.54826616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.96420115" y3="-4.47501371" z3="2.83402706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.11074158" y3="-5.65661683" z3="1.03529522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.17904472" y3="-1.55421294" z3="0.55171772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04236087" y3="-1.2141014" z3="2.95189687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.2677484" y3="-5.30117967" z3="3.48292521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.69545711" y3="-3.08213121" z3="4.46405906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.61694195" y3="-1.82523095" z3="-3.75569117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.6511188" y3="-1.41730173" z3="-2.84617784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.28427824" y3="3.68397242" z3="-0.84323146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.0535976" y3="-2.97283582" z3="-1.76811791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90950615" y3="-3.12983695" z3="-0.67368331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11340473" y3="-2.25838492" z3="0.25882548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.7865335" y3="-0.66274928" z3="0.48862113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.4113192" y3="-0.07653395" z3="-1.17073708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49104526" y3="0.38874522" z3="1.29530378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22125446" y3="-0.97205522" z3="1.65032062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46089368" y3="-4.32015866" z3="-0.48452604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.26418044" y3="-4.53697032" z3="0.66589336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.61596741" y3="0.37259744" z3="-1.78955958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.18718141" y3="0.69432982" z3="-1.02327191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.86581949" y3="-0.904979" z3="-1.74769275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.54138593" y3="0.4900435" z3="0.73623964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.24132611" y3="-0.01286625" z3="2.29070211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91939702" y3="1.39611813" z3="1.4379603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66065172" y3="-0.00623478" z3="1.95952001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02192477" y3="-1.56453244" z3="1.17185895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89013763" y3="-1.50119815" z3="2.56080658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.16481412" y3="-3.90192772" z3="0.63702015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.69560575" y3="-4.33326654" z3="1.58631705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.55471422" y3="-5.59491878" z3="0.62359972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.35776008" y3="-2.17956797" z3="-0.15318334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1755047" y3="-3.30165336" z3="-0.97393618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52206622" y3="-4.43473321" z3="-0.50340983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.04864128" y3="-4.43723323" z3="0.80294853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.2564728" y3="-3.36137109" z3="1.66138767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91071535" y3="-2.23636342" z3="1.17710343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49705434" y3="-3.26804344" z3="-2.01832453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34348706" y3="-5.29148171" z3="-1.15334874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26322003" y3="-5.57956227" z3="1.27627317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.87771151" y3="-3.40399084" z3="2.6833251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.04952482" y3="-1.37586936" z3="1.83270996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49285445" y3="3.98193067" z3="0.28319685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87147527" y3="3.817639" z3="0.2670016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.47051488" y3="3.36269012" z3="-0.89991329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.73248043" y3="3.08232763" z3="-2.04799387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.35198107" y3="3.23115932" z3="-2.00674546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00032825" y3="4.30411497" z3="1.20472165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47793842" y3="4.02093306" z3="1.1533591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.92022125" y3="3.15507113" z3="-0.92126869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23975727" y3="2.74050977" z3="-2.949765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24294563" y3="2.98519525" z3="-2.88779582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.11698419" y3="-5.71289576" z3="2.47044272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78574122" y3="-6.32227074" z3="0.43847315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.46676173" y3="3.06272396" z3="-2.00019606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49516721" y3="3.0683545" z3="0.14688102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52185889" y3="0.17574615" z3="-2.225824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84182008" y3="1.41602248" z3="-2.0510066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.62951687" y3="0.1074012" z3="-3.11557584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.03088451" y3="1.21001636" z3="-3.82846943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1493161" y3="-0.84839386" z3="-3.23323344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.87908656" y3="1.14406636" z3="-4.51559439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.2657344" y3="2.53262876" z3="-2.82441255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.33042125" y3="2.43220594" z3="-3.68745968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.72742153" y3="3.4784874" z3="-2.73421257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.63470606" y3="3.30246945" z3="-4.27589196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56910344" y3="3.90427515" z3="-0.32210698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75180222" y3="5.04240644" z3="-0.05969729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94861211" y3="3.97562263" z3="0.02227431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48982426" y3="5.12492765" z3="0.54639649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58265004" y3="3.09941641" z3="-0.12579937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55222429" y3="5.15359857" z3="0.80485758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34346946" y3="6.22186638" z3="0.47098374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68410509" y3="6.26860203" z3="0.76265838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70463573" y3="7.09108787" z3="0.65496984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12807083" y3="7.17884119" z3="1.1751535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24127368" y3="-3.89665718" z3="-2.95417017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48845951" y3="-4.92634231" z3="-2.65509409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.05954376" y3="-3.52737064" z3="-3.5997748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32717731" y3="-3.92175906" z3="-3.56843208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.54275222" y3="-1.59872922" z3="-2.10787255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2355941" y3="-1.07584523" z3="-2.79059317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.37188459" y3="-0.96673343" z3="-1.22252966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.57534094" y3="-1.67719632" z3="-2.63492882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.95,-.9442,-.729;6.5742,-1.9297,-1.7136;6.0537,-.9812,-1.5497;4.7365,1.4785,-1.1419;4.313,.3156,-.5238;2.5977,2.7098,-1.0794;3.9667,2.727,-.8763;2.3527,4.9636,-.2815;1.7612,3.817,-.757;1.7315,5.8321,-.0411;2.0063,1.5748,-1.554;3.2055,.3616,.2733;1.7381,.3389,-.4888;.6851,.655,.5078;1.6685,-.9075,-1.3429;1.1402,-2.5537,-1.205;2.3403,-5.5913,-6.0868;2.0155,-5.1512,-5.1397;1.1708,-3.9946,-2.7358;2.0224,-3.7713,-4.9851;1.6132,-5.9712,-4.0825;1.2077,-5.387,-2.8895;1.6098,-3.1609,-3.7894;2.3432,-3.1098,-5.7936;1.6305,-7.0596,-4.179;.9368,-6.0171,-2.0382;.7062,-3.4397,-1.5169;-.3439,-3.907,-.8316;-.6982,-4.8941,-1.1396;-.4505,-3.6376,.6188;-.6356,-3.2343,3.3824;-.8796,-4.6743,1.458;-.1296,-2.3949,1.1743;-.2202,-2.1958,2.5483;-.9642,-4.475,2.834;-1.1107,-5.6566,1.0353;.179,-1.5542,.5517;.0424,-1.2141,2.9519;-1.2677,-5.3012,3.4829;-.6955,-3.0821,4.4641;1.6169,-1.8252,-3.7557;1.6511,-1.4173,-2.8462;.2843,3.684,-.8432;-2.0536,-2.9728,-1.7681;-2.9095,-3.1298,-.6737;-3.1134,-2.2584,.2588;-3.7865,-.6627,.4886;-4.4113,-.0765,-1.1707;-2.491,.3887,1.2953;-5.2213,-.9721,1.6503;-3.4609,-4.3202,-.4845;-4.2642,-4.537,.6659;-3.616,.3726,-1.7896;-5.1872,.6943,-1.0233;-4.8658,-.905,-1.7477;-1.5414,.49,.7362;-2.2413,-.0129,2.2907;-2.9194,1.3961,1.438;-5.6607,-.0062,1.9595;-6.0219,-1.5645,1.1719;-4.8901,-1.5012,2.5608;-5.1648,-3.9019,.637;-3.6956,-4.3333,1.5863;-4.5547,-5.5949,.6236;4.3578,-2.1796,-.1532;4.1755,-3.3017,-.9739;3.5221,-4.4347,-.5034;3.0486,-4.4372,.8029;3.2565,-3.3614,1.6614;3.9107,-2.2364,1.1771;4.4971,-3.268,-2.0183;3.3435,-5.2915,-1.1533;2.2632,-5.5796,1.2763;2.8777,-3.404,2.6833;4.0495,-1.3759,1.8327;-.4929,3.9819,.2832;-1.8715,3.8176,.267;-2.4705,3.3627,-.8999;-1.7325,3.0823,-2.048;-.352,3.2312,-2.0067;.0003,4.3041,1.2047;-2.4779,4.0209,1.1534;-3.9202,3.1551,-.9213;-2.2398,2.7405,-2.9498;.2429,2.9852,-2.8878;2.117,-5.7129,2.4704;1.7857,-6.3223,.4385;-4.4668,3.0627,-2.0002;-4.4952,3.0684,.1469;6.5219,.1757,-2.2258;5.8418,1.416,-2.051;7.6295,.1074,-3.1156;8.0309,1.21,-3.8285;8.1493,-.8484,-3.2332;8.8791,1.1441,-4.5156;6.2657,2.5326,-2.8244;7.3304,2.4322,-3.6875;5.7274,3.4785,-2.7342;7.6347,3.3025,-4.2759;4.5691,3.9043,-.3221;3.7518,5.0424,-.0597;5.9486,3.9756,.0223;6.4898,5.1249,.5464;6.5827,3.0994,-.1258;7.5522,5.1536,.8049;4.3435,6.2219,.471;5.6841,6.2686,.7627;3.7046,7.0911,.655;6.1281,7.1788,1.1752;-2.2413,-3.8967,-2.9542;-2.4885,-4.9263,-2.6551;-3.0595,-3.5274,-3.5998;-1.3272,-3.9218,-3.5684;-1.5428,-1.5987,-2.1079;-2.2356,-1.0758,-2.7906;-1.3719,-.9667,-1.2225;-.5753,-1.6772,-2.6349;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662406278587</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005235492979 0.000803321780 0.024201233916 0.005339914395</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054605224 -0.003159530 0.000167150 0.000233792 0.000323585 0.000354820 0.000382938 0.000428482 0.000543951 0.000640195 0.000766900 0.000820067 0.000969551 0.001086938 0.001246971 0.001255803 0.001276250 0.001396831 0.001514806 0.001673165 0.001772424 0.002095306 0.002234243 0.002613336 0.002992079 0.003254348 0.003654407 0.003723142 0.003911990 0.004398027 0.004814627 0.004956453 0.005114992 0.005593834 0.005846929 0.005931149 0.006552201 0.006852201 0.007132430 0.007558688 0.007837013 0.008600494 0.009206179 0.009251795 0.009674780 0.010316044 0.010717306 0.011629819 0.012706620 0.012990057 0.013190644 0.014417936 0.014519339 0.014892013 0.015216951 0.015542285 0.015698881 0.016339297 0.017383913 0.017756210 0.018069113 0.018710097 0.020091630 0.020268397 0.021234958 0.022142726 0.022603189 0.023253367 0.023906547 0.024313188 0.025481140 0.026165759 0.026485182 0.026801071 0.027766587 0.028217336 0.029999060 0.030439017 0.031923531 0.032498428 0.032771579 0.034959683 0.038565651 0.038720440 0.040681693 0.041092876 0.044907981 0.045189188 0.045357967 0.045917117 0.048041743 0.049670394 0.051419579 0.051587119 0.051820573 0.052279934 0.052358388 0.052562883 0.052918783 0.054123077 0.054927189 0.055522909 0.056495211 0.056880792 0.057150410 0.057764124 0.058622192 0.059221691 0.059734148 0.060737796 0.061409716 0.061867258 0.062602549 0.064203683 0.064582889 0.065203215 0.066142919 0.067714935 0.068106226 0.068692119 0.069328094 0.071547974 0.072386146 0.072821368 0.076527678 0.078988498 0.080859656 0.080967609 0.082839550 0.084454573 0.087835128 0.088643768 0.089566574 0.091085618 0.092896868 0.094191152 0.095320108 0.095799440 0.096704645 0.097807399 0.098968494 0.099828584 0.101239500 0.101619326 0.102898640 0.103056466 0.104181679 0.107211654 0.108921286 0.110429682 0.110639111 0.111752882 0.112812987 0.113279343 0.114662447 0.116448167 0.117155926 0.117700270 0.119311866 0.122705239 0.124540475 0.127397589 0.127776510 0.128528533 0.129624497 0.133157385 0.134645230 0.135891444 0.137125857 0.139504465 0.142801197 0.144612111 0.146077038 0.149198454 0.151122164 0.153015495 0.154790866 0.160103235 0.165864107 0.170830501 0.174588112 0.177155814 0.180768604 0.183416960 0.186239939 0.187768459 0.189069660 0.197196313 0.200864492 0.201864202 0.205395412 0.206115381 0.207153975 0.209098092 0.211866634 0.213015467 0.213746775 0.216217531 0.217962096 0.221475636 0.224998081 0.231543357 0.232756557 0.234134814 0.235522650 0.240835959 0.245686596 0.249529152 0.254946555 0.255469834 0.257007377 0.261092433 0.271385094 0.278734767 0.291202031 0.297757642 0.298887283 0.300356049 0.305631606 0.306735107 0.307556141 0.317870133 0.321019013 0.325191922 0.327718784 0.329681974 0.346942810 0.351112216 0.355308442 0.357580567 0.359340526 0.363887941 0.383202580 0.399465274 0.406064042 0.428575188 0.429897194 0.431052168 0.445743864 0.458476998 0.464524723 0.466166430 0.477887737 0.484406815 0.497141974 0.498044620 0.509987842 0.514586720 0.543061321 0.565480942 0.567153892 0.583357770 0.590667207 0.605240330 0.640709734 0.644689349 0.665560667 0.673817836 0.681441473 0.688110629 0.691947567 0.699221551 0.704243915 0.714955106 0.723325886 0.734830395 0.737658077 0.740777170 0.750707592 0.771583808 0.775916968 0.803552834 0.817273466 0.820219194 0.820998568 0.831824324 0.840487078 0.843906041 0.846814228 0.850572042 0.858683065 0.866059281 0.867353453 0.873065508 0.875022980 0.882356113 0.889687548 0.890923269 0.896311038 0.900847793 0.916192944 0.918987319 0.924221687 0.931050487 0.937125377 0.949511458 0.957447670 0.960156158 0.969909821 0.980142103 0.983840581 0.998446425 1.011371421 1.016997131 1.038718007 1.048649799 1.055285505 1.065401606 1.076338379 1.086820099 1.098839063 1.110199602 1.111166136 1.116438793 1.122478723 1.123462105 1.134529696 1.144142613 1.161298729 1.169829033 1.172924012 1.175902931 1.200538928 1.215202304 1.221278520 1.247315389 1.295125924 1.295933185 1.314134375 1.323781111 1.326312919 1.327382226 1.330151257 1.334532928 1.341051609 1.346103705 1.362417866 1.378797704 1.380908688 1.381414114 1.392328392 1.492761407 1.557539077 1.671864965 1.899641652</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">103</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95759252" y3="-0.94285081" z3="-0.72766087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58092518" y3="-1.92763638" z3="-1.71430109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06012779" y3="-0.97935409" z3="-1.54984704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74151059" y3="1.47932156" z3="-1.14114122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3197096" y3="0.31643424" z3="-0.52213098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60141691" y3="2.7066234" z3="-1.07890377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97020252" y3="2.72673862" z3="-0.8763727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35216625" y3="4.96093902" z3="-0.28341543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76316021" y3="3.81241614" z3="-0.75716863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72938074" y3="5.82842704" z3="-0.04393893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0114602" y3="1.57003836" z3="-1.55162853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21308582" y3="0.3616034" z3="0.2760653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74455082" y3="0.33622092" z3="-0.48387576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69269617" y3="0.65354525" z3="0.51330438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6740237" y3="-0.91200669" z3="-1.33558087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14287583" y3="-2.55870922" z3="-1.20147977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.3321019" y3="-5.59009753" z3="-6.09045792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00962052" y3="-5.15115518" z3="-5.14206848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.17043472" y3="-3.99703376" z3="-2.73530463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.02178426" y3="-3.77180249" z3="-4.98435095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60519342" y3="-5.97218443" z3="-4.08641785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20231517" y3="-5.38921799" z3="-2.89198601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.6126444" y3="-3.16236581" z3="-3.78692087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.34447707" y3="-3.10943516" z3="-5.79134109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61865256" y3="-7.06045056" z3="-4.18550995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92921706" y3="-6.02033318" z3="-2.04217176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70660364" y3="-3.44310895" z3="-1.51536858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34142563" y3="-3.91142108" z3="-0.83016941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70102994" y3="-4.8954481" z3="-1.14054485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45282342" y3="-3.63930657" z3="0.61895506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.64745194" y3="-3.23246962" z3="3.38114566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.89125523" y3="-4.67266938" z3="1.4570713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12727892" y3="-2.39819007" z3="1.17470249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22225334" y3="-2.19742962" z3="2.54807413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.98086952" y3="-4.47146577" z3="2.83234636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.12585547" y3="-5.65337154" z3="1.0337878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.18808947" y3="-1.55996831" z3="0.55227694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04434068" y3="-1.21702089" z3="2.9518443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.29194964" y3="-5.29503035" z3="3.48046037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.71120483" y3="-3.07884642" z3="4.4623218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.62691812" y3="-1.82710941" z3="-3.75144158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.65432539" y3="-1.42001105" z3="-2.83861468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.2866575" y3="3.67475542" z3="-0.84038821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05543851" y3="-2.96821878" z3="-1.76908149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91102453" y3="-3.12877834" z3="-0.67685363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11589232" y3="-2.25943372" z3="0.25851687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78626523" y3="-0.664531" z3="0.49379743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.41333723" y3="-0.07973126" z3="-1.168185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48717331" y3="0.38515617" z3="1.29272176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21315201" y3="-0.97416769" z3="1.6600959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4640476" y3="-4.31974178" z3="-0.49322027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.27260925" y3="-4.53961587" z3="0.65231592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.6215021" y3="0.36471516" z3="-1.78967283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19508409" y3="0.68931383" z3="-1.01930852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.86846315" y3="-0.90862076" z3="-1.73952273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.5416408" y3="0.48574213" z3="0.7307567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23870973" y3="-0.02585273" z3="2.29048131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90988719" y3="1.39727757" z3="1.43513819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.65340051" y3="-0.00885212" z3="1.97048199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01337182" y3="-1.56873209" z3="1.18779629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.87808003" y3="-1.50112807" z3="2.57130122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.17257249" y3="-3.9035752" z3="0.62123276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.70804442" y3="-4.33938059" z3="1.57631235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.56441395" y3="-5.59758247" z3="0.60609347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36523274" y3="-2.17758722" z3="-0.15085823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1782569" y3="-3.29893063" z3="-0.9714067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5209311" y3="-4.4295336" z3="-0.50017996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.04869906" y3="-4.43016757" z3="0.80661742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.26212361" y3="-3.35548483" z3="1.66507253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.92025917" y3="-2.23310801" z3="1.1801126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49863191" y3="-3.26626585" z3="-2.01616712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3376988" y3="-5.2854986" z3="-1.14996253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25799454" y3="-5.56873516" z3="1.2801528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.8843032" y3="-3.39666327" z3="2.68737379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06301682" y3="-1.37312042" z3="1.83542208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48954368" y3="3.97256389" z3="0.28855905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.868982" y3="3.8105986" z3="0.27074677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.47200308" y3="3.36011096" z3="-0.90190836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.73172392" y3="3.07130863" z3="-2.04417395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.35095727" y3="3.21988281" z3="-2.00418229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00269897" y3="4.30067328" z3="1.20627466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47806194" y3="4.02014382" z3="1.14875661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.92215315" y3="3.15462511" z3="-0.92334617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.24119623" y3="2.73016204" z3="-2.94795105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24305496" y3="2.9736705" z3="-2.88726083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.10786275" y3="-5.69901928" z3="2.47409754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78020641" y3="-6.31139981" z3="0.44259772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.4660938" y3="3.05608386" z3="-2.00026399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49750001" y3="3.07023062" z3="0.14631142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52652794" y3="0.17777846" z3="-2.22689734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.84573709" y3="1.41755511" z3="-2.05156428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.63295614" y3="0.11023582" z3="-3.11820191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.03233101" y3="1.21302841" z3="-3.83198483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.15344952" y3="-0.84508457" z3="-3.23626638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.87959631" y3="1.14763641" z3="-4.52024306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.26753497" y3="2.53436848" z3="-2.82590752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.33109266" y3="2.43466776" z3="-3.69041446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.72849843" y3="3.47974613" z3="-2.73525758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.63384417" y3="3.30506239" z3="-4.27947094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57045379" y3="3.9057104" z3="-0.32382505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75129357" y3="5.04260313" z3="-0.06230761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94988025" y3="3.97972454" z3="0.01997565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48928615" y3="5.13038072" z3="0.5428854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58516151" y3="3.10440293" z3="-0.12755121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55169096" y3="5.16109179" z3="0.80090632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34097143" y3="6.22350499" z3="0.46740553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68156494" y3="6.27277495" z3="0.75864594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70050148" y3="7.09173621" z3="0.65146307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1240072" y3="7.18409745" z3="1.17035298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23964654" y3="-3.88960275" z3="-2.9584675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48600517" y3="-4.92080799" z3="-2.66131133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.05831088" y3="-3.52036062" z3="-3.60647884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32480584" y3="-3.91323439" z3="-3.57209151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.53770143" y3="-1.59608118" z3="-2.10146147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.22979458" y3="-1.07058534" z3="-2.78468654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.36785571" y3="-0.96326911" z3="-1.214388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.57910452" y3="-1.67077888" z3="-2.63238179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9576,-.9429,-.7277;6.5809,-1.9276,-1.7143;6.0601,-.9794,-1.5498;4.7415,1.4793,-1.1411;4.3197,.3164,-.5221;2.6014,2.7066,-1.0789;3.9702,2.7267,-.8764;2.3522,4.9609,-.2834;1.7632,3.8124,-.7572;1.7294,5.8284,-.0439;2.0115,1.57,-1.5516;3.2131,.3616,.2761;1.7446,.3362,-.4839;.6927,.6535,.5133;1.674,-.912,-1.3356;1.1429,-2.5587,-1.2015;2.3321,-5.5901,-6.0905;2.0096,-5.1512,-5.1421;1.1704,-3.997,-2.7353;2.0218,-3.7718,-4.9844;1.6052,-5.9722,-4.0864;1.2023,-5.3892,-2.892;1.6126,-3.1624,-3.7869;2.3445,-3.1094,-5.7913;1.6187,-7.0605,-4.1855;.9292,-6.0203,-2.0422;.7066,-3.4431,-1.5154;-.3414,-3.9114,-.8302;-.701,-4.8954,-1.1405;-.4528,-3.6393,.619;-.6475,-3.2325,3.3811;-.8913,-4.6727,1.4571;-.1273,-2.3982,1.1747;-.2223,-2.1974,2.5481;-.9809,-4.4715,2.8323;-1.1259,-5.6534,1.0338;.1881,-1.56,.5523;.0443,-1.217,2.9518;-1.2919,-5.295,3.4805;-.7112,-3.0788,4.4623;1.6269,-1.8271,-3.7514;1.6543,-1.42,-2.8386;.2867,3.6748,-.8404;-2.0554,-2.9682,-1.7691;-2.911,-3.1288,-.6769;-3.1159,-2.2594,.2585;-3.7863,-.6645,.4938;-4.4133,-.0797,-1.1682;-2.4872,.3852,1.2927;-5.2132,-.9742,1.6601;-3.464,-4.3197,-.4932;-4.2726,-4.5396,.6523;-3.6215,.3647,-1.7897;-5.1951,.6893,-1.0193;-4.8685,-.9086,-1.7395;-1.5416,.4857,.7308;-2.2387,-.0259,2.2905;-2.9099,1.3973,1.4351;-5.6534,-.0089,1.9705;-6.0134,-1.5687,1.1878;-4.8781,-1.5011,2.5713;-5.1726,-3.9036,.6212;-3.708,-4.3394,1.5763;-4.5644,-5.5976,.6061;4.3652,-2.1776,-.1509;4.1783,-3.2989,-.9714;3.5209,-4.4295,-.5002;3.0487,-4.4302,.8066;3.2621,-3.3555,1.6651;3.9203,-2.2331,1.1801;4.4986,-3.2663,-2.0162;3.3377,-5.2855,-1.15;2.258,-5.5687,1.2802;2.8843,-3.3967,2.6874;4.063,-1.3731,1.8354;-.4895,3.9726,.2886;-1.869,3.8106,.2707;-2.472,3.3601,-.9019;-1.7317,3.0713,-2.0442;-.351,3.2199,-2.0042;.0027,4.3007,1.2063;-2.4781,4.0201,1.1488;-3.9222,3.1546,-.9233;-2.2412,2.7302,-2.948;.2431,2.9737,-2.8873;2.1079,-5.699,2.4741;1.7802,-6.3114,.4426;-4.4661,3.0561,-2.0003;-4.4975,3.0702,.1463;6.5265,.1778,-2.2269;5.8457,1.4176,-2.0516;7.633,.1102,-3.1182;8.0323,1.213,-3.832;8.1534,-.8451,-3.2363;8.8796,1.1476,-4.5202;6.2675,2.5344,-2.8259;7.3311,2.4347,-3.6904;5.7285,3.4797,-2.7353;7.6338,3.3051,-4.2795;4.5705,3.9057,-.3238;3.7513,5.0426,-.0623;5.9499,3.9797,.02;6.4893,5.1304,.5429;6.5852,3.1044,-.1276;7.5517,5.1611,.8009;4.341,6.2235,.4674;5.6816,6.2728,.7586;3.7005,7.0917,.6515;6.124,7.1841,1.1704;-2.2396,-3.8896,-2.9585;-2.486,-4.9208,-2.6613;-3.0583,-3.5204,-3.6065;-1.3248,-3.9132,-3.5721;-1.5377,-1.5961,-2.1015;-2.2298,-1.0706,-2.7847;-1.3679,-.9633,-1.2144;-.5791,-1.6708,-2.6324;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662379513262</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005670240149 0.000853846372 0.021122190268 0.005338946293</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.054963006 -0.003726807 0.000169899 0.000261076 0.000312771 0.000350094 0.000396561 0.000430984 0.000544878 0.000634851 0.000765111 0.000819966 0.000970404 0.001089078 0.001244436 0.001255844 0.001280029 0.001396614 0.001512609 0.001672517 0.001775495 0.002095238 0.002244635 0.002621025 0.002988987 0.003259057 0.003658581 0.003744502 0.003913294 0.004419259 0.004815660 0.004955691 0.005117905 0.005594837 0.005847172 0.005943233 0.006600925 0.006852013 0.007215314 0.007685369 0.007841843 0.008600188 0.009216341 0.009255268 0.009679785 0.010362643 0.010728636 0.011626358 0.012709368 0.012995777 0.013232543 0.014428280 0.014560896 0.015099660 0.015225855 0.015552376 0.015703677 0.016339947 0.017438500 0.017760380 0.018077936 0.018738325 0.020106866 0.020293290 0.021257805 0.022153212 0.022602625 0.023254027 0.024030578 0.024396499 0.025483225 0.026163392 0.026498228 0.026805164 0.027769161 0.028216627 0.030004336 0.030438993 0.031925016 0.032516991 0.032807435 0.034998123 0.038565716 0.038720677 0.040683057 0.041106622 0.044974261 0.045193218 0.045396078 0.046180372 0.048099537 0.049671513 0.051421577 0.051586875 0.051821283 0.052279890 0.052360513 0.052564185 0.052955933 0.054156609 0.054942289 0.055566459 0.056495187 0.056883746 0.057153314 0.057768042 0.058623850 0.059221847 0.059742473 0.060774865 0.061417276 0.062061520 0.062605742 0.064204594 0.064599583 0.065266481 0.066143730 0.067714423 0.068133323 0.068694371 0.069355436 0.071554495 0.072386411 0.072822151 0.076531288 0.078988417 0.080862995 0.080968866 0.082840106 0.084460417 0.087830725 0.088643865 0.089566638 0.091097038 0.092927843 0.094191912 0.095321077 0.095817887 0.096705354 0.097809476 0.098982437 0.099855039 0.101244615 0.101638379 0.102901942 0.103089518 0.104197406 0.107261598 0.108942981 0.110614986 0.110800200 0.111844007 0.112818872 0.113393820 0.114668942 0.116457723 0.117208058 0.117895990 0.119770782 0.122939081 0.124540622 0.127414434 0.127797289 0.128745952 0.129660590 0.133204102 0.134798695 0.135980215 0.137127096 0.139507409 0.142797112 0.144614525 0.146100961 0.149517733 0.151227100 0.153017297 0.154816475 0.160112793 0.165890560 0.170883857 0.174588684 0.177429483 0.180794183 0.183417025 0.186362551 0.187776825 0.189251284 0.197194785 0.201676501 0.201900326 0.205407032 0.206150563 0.207154958 0.209099062 0.211895125 0.213019272 0.214021673 0.216260195 0.218113628 0.221541273 0.225006757 0.231543306 0.232757627 0.234214469 0.235688353 0.240833781 0.245710638 0.249529358 0.254998838 0.255483380 0.257010327 0.261147279 0.271385149 0.279019978 0.291216631 0.297817187 0.298903058 0.300357704 0.305640698 0.306866720 0.307561596 0.317871269 0.321019057 0.325226211 0.327719325 0.329853669 0.346942422 0.351111969 0.355308206 0.357677712 0.359340613 0.363889008 0.383224465 0.400025436 0.406063476 0.428655877 0.429919149 0.431058315 0.445745254 0.458799669 0.464525192 0.466276693 0.477887730 0.484457954 0.497333843 0.498044609 0.510186570 0.514614490 0.543061364 0.565481157 0.567158072 0.583383960 0.590702849 0.605250900 0.640709713 0.644689374 0.665560831 0.673824053 0.681556729 0.688274306 0.691967161 0.699221977 0.704243914 0.714957516 0.723324804 0.734869786 0.737660155 0.740791966 0.750707604 0.771584181 0.775917287 0.803700205 0.817273901 0.820318803 0.821079404 0.831833923 0.840594349 0.844109261 0.846815549 0.850707440 0.858710753 0.866692626 0.867354311 0.873148879 0.875023681 0.882596427 0.889931648 0.891016368 0.896360882 0.901313800 0.916193257 0.919299313 0.924233242 0.931052193 0.937246912 0.949589454 0.957551250 0.960184324 0.970011074 0.981158317 0.985032292 0.998447021 1.011370570 1.017098137 1.038725856 1.048711045 1.055287717 1.065551144 1.076344607 1.086829260 1.099075585 1.110199658 1.111169240 1.116442449 1.122479306 1.123464076 1.134535776 1.144257262 1.161308417 1.169842462 1.172929479 1.175959394 1.200539757 1.215610514 1.221843021 1.247316430 1.295153373 1.295976717 1.314174471 1.323869737 1.326323627 1.327525915 1.330152226 1.334533004 1.341052987 1.346114495 1.362419177 1.378798239 1.380909373 1.381415571 1.394065294 1.493144424 1.557545710 1.671865548 1.900357376</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">104</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96378526" y3="-0.9419433" z3="-0.72492809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58702926" y3="-1.92678141" z3="-1.71166351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06611958" y3="-0.97851267" z3="-1.54736846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74593767" y3="1.47983029" z3="-1.14051098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32542836" y3="0.31722237" z3="-0.51997636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60353004" y3="2.7045728" z3="-1.07796039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97295738" y3="2.72667406" z3="-0.87682215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35196415" y3="4.95958106" z3="-0.28568177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76347705" y3="3.80952414" z3="-0.75687906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72837967" y3="5.82691342" z3="-0.04762907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0148135" y3="1.56678242" z3="-1.54930197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21941191" y3="0.36245708" z3="0.27913557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75022527" y3="0.33398646" z3="-0.4792643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69891903" y3="0.65179744" z3="0.51857083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68036995" y3="-0.91528043" z3="-1.32917002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14302141" y3="-2.56098409" z3="-1.1996277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32655984" y3="-5.58335933" z3="-6.09511879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00561645" y3="-5.14616111" z3="-5.14534407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16954999" y3="-3.99682954" z3="-2.73496526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.02011911" y3="-3.7670554" z3="-4.98402826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60029932" y3="-5.96907876" z3="-4.09157619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19941898" y3="-5.388629" z3="-2.89516517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.61162708" y3="-3.16032607" z3="-3.78501836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.34343839" y3="-3.1034221" z3="-5.78973207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61145239" y3="-7.05712515" z3="-4.19364293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92540117" y3="-6.02135985" z3="-2.04686215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70665972" y3="-3.44474815" z3="-1.51424954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34699494" y3="-3.90929409" z3="-0.83161766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70265777" y3="-4.8956218" z3="-1.1404591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.4562198" y3="-3.6394782" z3="0.61835257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.65812265" y3="-3.22935452" z3="3.37985826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.90136395" y3="-4.67027145" z3="1.45616818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12626824" y3="-2.3995958" z3="1.1743261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22479364" y3="-2.19716491" z3="2.54723721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.99514422" y3="-4.46740645" z3="2.83098646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.13907707" y3="-5.65034983" z3="1.03309376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.19485969" y3="-1.56325273" z3="0.5521611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04481097" y3="-1.21740249" z3="2.95088169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.31307183" y3="-5.28859322" z3="3.47894154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.72565882" y3="-3.07427013" z3="4.46059855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.62418242" y3="-1.82490191" z3="-3.74441033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.66275948" y3="-1.4212732" z3="-2.83434112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.28695249" y3="3.67194224" z3="-0.8419217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.04952397" y3="-2.9701118" z3="-1.76891702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91176714" y3="-3.13122873" z3="-0.67940186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11723917" y3="-2.26571179" z3="0.25795059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78457749" y3="-0.66965103" z3="0.49560656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.4240384" y3="-0.08712403" z3="-1.15633035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48265609" y3="0.381299" z3="1.29223388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.2099224" y3="-0.97884732" z3="1.6711665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46836939" y3="-4.32007815" z3="-0.50209258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.28088977" y3="-4.54358213" z3="0.64024398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.63549984" y3="0.35525456" z3="-1.78481333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.19175357" y3="0.68751258" z3="-1.00345795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.88593641" y3="-0.91507169" z3="-1.72085397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.53671653" y3="0.48273768" z3="0.72650238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2242666" y3="-0.02090315" z3="2.28295952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90759923" y3="1.39193731" z3="1.43590385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.64726495" y3="-0.01297669" z3="1.9826741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01362142" y3="-1.57384372" z3="1.20143747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.86876341" y3="-1.5054827" z3="2.57874379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.18084468" y3="-3.90785736" z3="0.60780522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.71943396" y3="-4.34587214" z3="1.56629853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57214755" y3="-5.60099975" z3="0.58921166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37048307" y3="-2.17627448" z3="-0.14815986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18047365" y3="-3.29657231" z3="-0.96930992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5189537" y3="-4.4250706" z3="-0.49908136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.04602886" y3="-4.42475388" z3="0.80743362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.26321028" y3="-3.35159784" z3="1.66673892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.92543415" y3="-2.23129135" z3="1.18274342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50101828" y3="-3.26412679" z3="-2.01401382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33236708" y3="-5.27962269" z3="-1.14964689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24979928" y3="-5.56002388" z3="1.27957899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.88467652" y3="-3.3919854" z3="2.6887816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07062596" y3="-1.372107" z3="1.8384635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49078077" y3="3.97437116" z3="0.2831554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87067855" y3="3.81351373" z3="0.26445073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46859624" y3="3.35244578" z3="-0.89927099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72973703" y3="3.06494616" z3="-2.04567533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34896197" y3="3.21393267" z3="-2.00484773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00334285" y3="4.29906013" z3="1.20435966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47872627" y3="4.02234836" z3="1.14671037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.91648487" y3="3.14239876" z3="-0.91879967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23739813" y3="2.71819658" z3="-2.94593015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24628784" y3="2.96333326" z3="-2.88379196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.09702208" y3="-5.68959361" z3="2.4732835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77030771" y3="-6.30073802" z3="0.44129725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45860583" y3="3.03982594" z3="-1.99830727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49465667" y3="3.06357348" z3="0.14855974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53184524" y3="0.17850237" z3="-2.22520926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85018557" y3="1.41798752" z3="-2.05090357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6381976" y3="0.11096945" z3="-3.11662691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.03669983" y3="1.21339421" z3="-3.83146121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1593644" y3="-0.84409018" z3="-3.23402478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.88385838" y3="1.14797616" z3="-4.51988303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.27111953" y3="2.53433687" z3="-2.82631749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.33459614" y3="2.43463752" z3="-3.69088486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73140914" y3="3.47938897" z3="-2.7365208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.6365516" y3="3.30469727" z3="-4.28084437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57219013" y3="3.90727156" z3="-0.32620949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75141984" y3="5.04347645" z3="-0.06597478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9518526" y3="3.98376207" z3="0.01687446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48987375" y3="5.13605028" z3="0.53774836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58840197" y3="3.1090733" z3="-0.12936827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55230032" y3="5.16865522" z3="0.79557607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33998606" y3="6.22618012" z3="0.46104011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68074651" y3="6.27779119" z3="0.75161325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69858211" y3="7.09386327" z3="0.64326775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1221752" y3="7.19043232" z3="1.16155749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23594962" y3="-3.88687718" z3="-2.96141436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48148479" y3="-4.91895796" z3="-2.66874554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.0548363" y3="-3.51516897" z3="-3.60577486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32159713" y3="-3.90716657" z3="-3.5753248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.53725485" y3="-1.59380176" z3="-2.09838146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.22903537" y3="-1.06656278" z3="-2.77844872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.36681932" y3="-0.96681596" z3="-1.20917821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.56999239" y3="-1.66938207" z3="-2.62488803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9638,-.9419,-.7249;6.587,-1.9268,-1.7117;6.0661,-.9785,-1.5474;4.7459,1.4798,-1.1405;4.3254,.3172,-.52;2.6035,2.7046,-1.078;3.973,2.7267,-.8768;2.352,4.9596,-.2857;1.7635,3.8095,-.7569;1.7284,5.8269,-.0476;2.0148,1.5668,-1.5493;3.2194,.3625,.2791;1.7502,.334,-.4793;.6989,.6518,.5186;1.6804,-.9153,-1.3292;1.143,-2.561,-1.1996;2.3266,-5.5834,-6.0951;2.0056,-5.1462,-5.1453;1.1695,-3.9968,-2.735;2.0201,-3.7671,-4.984;1.6003,-5.9691,-4.0916;1.1994,-5.3886,-2.8952;1.6116,-3.1603,-3.785;2.3434,-3.1034,-5.7897;1.6115,-7.0571,-4.1936;.9254,-6.0214,-2.0469;.7067,-3.4447,-1.5142;-.347,-3.9093,-.8316;-.7027,-4.8956,-1.1405;-.4562,-3.6395,.6184;-.6581,-3.2294,3.3799;-.9014,-4.6703,1.4562;-.1263,-2.3996,1.1743;-.2248,-2.1972,2.5472;-.9951,-4.4674,2.831;-1.1391,-5.6503,1.0331;.1949,-1.5633,.5522;.0448,-1.2174,2.9509;-1.3131,-5.2886,3.4789;-.7257,-3.0743,4.4606;1.6242,-1.8249,-3.7444;1.6628,-1.4213,-2.8343;.287,3.6719,-.8419;-2.0495,-2.9701,-1.7689;-2.9118,-3.1312,-.6794;-3.1172,-2.2657,.258;-3.7846,-.6697,.4956;-4.424,-.0871,-1.1563;-2.4827,.3813,1.2922;-5.2099,-.9788,1.6712;-3.4684,-4.3201,-.5021;-4.2809,-4.5436,.6402;-3.6355,.3553,-1.7848;-5.1918,.6875,-1.0035;-4.8859,-.9151,-1.7209;-1.5367,.4827,.7265;-2.2243,-.0209,2.283;-2.9076,1.3919,1.4359;-5.6473,-.013,1.9827;-6.0136,-1.5738,1.2014;-4.8688,-1.5055,2.5787;-5.1808,-3.9079,.6078;-3.7194,-4.3459,1.5663;-4.5721,-5.601,.5892;4.3705,-2.1763,-.1482;4.1805,-3.2966,-.9693;3.519,-4.4251,-.4991;3.046,-4.4248,.8074;3.2632,-3.3516,1.6667;3.9254,-2.2313,1.1827;4.501,-3.2641,-2.014;3.3324,-5.2796,-1.1496;2.2498,-5.56,1.2796;2.8847,-3.392,2.6888;4.0706,-1.3721,1.8385;-.4908,3.9744,.2832;-1.8707,3.8135,.2645;-2.4686,3.3524,-.8993;-1.7297,3.0649,-2.0457;-.349,3.2139,-2.0048;.0033,4.2991,1.2044;-2.4787,4.0223,1.1467;-3.9165,3.1424,-.9188;-2.2374,2.7182,-2.9459;.2463,2.9633,-2.8838;2.097,-5.6896,2.4733;1.7703,-6.3007,.4413;-4.4586,3.0398,-1.9983;-4.4947,3.0636,.1486;6.5318,.1785,-2.2252;5.8502,1.418,-2.0509;7.6382,.111,-3.1166;8.0367,1.2134,-3.8315;8.1594,-.8441,-3.234;8.8839,1.148,-4.5199;6.2711,2.5343,-2.8263;7.3346,2.4346,-3.6909;5.7314,3.4794,-2.7365;7.6366,3.3047,-4.2808;4.5722,3.9073,-.3262;3.7514,5.0435,-.066;5.9519,3.9838,.0169;6.4899,5.1361,.5377;6.5884,3.1091,-.1294;7.5523,5.1687,.7956;4.34,6.2262,.461;5.6807,6.2778,.7516;3.6986,7.0939,.6433;6.1222,7.1904,1.1616;-2.2359,-3.8869,-2.9614;-2.4815,-4.919,-2.6687;-3.0548,-3.5152,-3.6058;-1.3216,-3.9072,-3.5753;-1.5373,-1.5938,-2.0984;-2.229,-1.0666,-2.7784;-1.3668,-.9668,-1.2092;-.57,-1.6694,-2.6249;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662358984713</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007866712568 0.000900380874 0.023618751341 0.005338134655</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055326348 -0.004099926 0.000154392 0.000192584 0.000311941 0.000350537 0.000382130 0.000438982 0.000536466 0.000634481 0.000762233 0.000820345 0.000970483 0.001088913 0.001244710 0.001256495 0.001281892 0.001395865 0.001511523 0.001680403 0.001775532 0.002100923 0.002239780 0.002622083 0.002988739 0.003267353 0.003660886 0.003759990 0.003922833 0.004418934 0.004815751 0.005003567 0.005117221 0.005612044 0.005847817 0.005939553 0.006625181 0.006851266 0.007226125 0.007698052 0.007846081 0.008601828 0.009214905 0.009270120 0.009702680 0.010357965 0.010781941 0.011640222 0.012709414 0.012995717 0.013263538 0.014438208 0.014570281 0.015200871 0.015458563 0.015639512 0.015835101 0.016341150 0.017751055 0.017773253 0.018123662 0.018735050 0.020139949 0.020405141 0.021369175 0.022217738 0.022609759 0.023253928 0.024195518 0.024617244 0.025489191 0.026177758 0.026527213 0.026805049 0.027772582 0.028244877 0.030019087 0.030439012 0.031928585 0.032542346 0.032872921 0.035055059 0.038567095 0.038723447 0.040693269 0.041112267 0.044970714 0.045198196 0.045393494 0.046428371 0.048258355 0.049672623 0.051446284 0.051602199 0.051823869 0.052279935 0.052360820 0.052564046 0.052955411 0.054187188 0.054943094 0.055580647 0.056495620 0.056883459 0.057156420 0.057769612 0.058626459 0.059222024 0.059774773 0.060777555 0.061438236 0.062375215 0.062619508 0.064206517 0.064616602 0.065451209 0.066167921 0.067761287 0.068216286 0.068698501 0.069397698 0.071571674 0.072389278 0.072821841 0.076530429 0.078992420 0.080862599 0.080974448 0.082840099 0.084483763 0.087843725 0.088645291 0.089567077 0.091101858 0.092955679 0.094195902 0.095323017 0.095826415 0.096705692 0.097813929 0.098980725 0.099869945 0.101246151 0.101638538 0.102910551 0.103092919 0.104206551 0.107291521 0.108942965 0.110623823 0.110900942 0.111891184 0.112826185 0.113474458 0.114669811 0.116463421 0.117228706 0.117995020 0.120495691 0.123314960 0.124543839 0.127427116 0.127803848 0.128845086 0.129693309 0.133236893 0.134911075 0.136078917 0.137133345 0.139507697 0.142800181 0.144614890 0.146106939 0.149555012 0.151315872 0.153018361 0.154826951 0.160123673 0.165919531 0.170925268 0.174590748 0.177631267 0.180812106 0.183417347 0.186442008 0.187779245 0.189457497 0.197205156 0.201844434 0.202783243 0.205415545 0.206178239 0.207155480 0.209099780 0.211952504 0.213022943 0.214148692 0.216292561 0.218279674 0.221600986 0.225008030 0.231543797 0.232757753 0.234259720 0.235826353 0.241090472 0.245741494 0.249538346 0.255050778 0.255491570 0.257010505 0.261255718 0.271385631 0.279323831 0.291216220 0.297836787 0.298903154 0.300359987 0.305673544 0.307006243 0.307576483 0.317871472 0.321023879 0.325224543 0.327721221 0.329986376 0.346956110 0.351116287 0.355317185 0.357785516 0.359340737 0.363889568 0.383225527 0.401535340 0.406069380 0.428661734 0.429925016 0.431082189 0.445747781 0.459021174 0.464527938 0.466306282 0.477887724 0.484484236 0.497426637 0.498045142 0.510555274 0.514615482 0.543062112 0.565483213 0.567167183 0.583436269 0.590824341 0.605288736 0.640725320 0.644689778 0.665562058 0.673854990 0.681779187 0.689085411 0.692041109 0.699230713 0.704243917 0.714962774 0.723440030 0.734884971 0.737660124 0.741259387 0.750708003 0.771585281 0.775918891 0.803784473 0.817274194 0.820449134 0.821319914 0.831856247 0.840760387 0.844248429 0.846822303 0.850848278 0.858721963 0.867156833 0.867357952 0.873189444 0.875050986 0.883016967 0.890051034 0.891073434 0.896475042 0.901793702 0.916197688 0.919530242 0.924261413 0.931053620 0.937297234 0.949611264 0.957562036 0.960185172 0.970065525 0.981763076 0.988413073 0.998447087 1.011376385 1.017257714 1.038732294 1.048786401 1.055291815 1.065676551 1.076344807 1.086836996 1.099379645 1.110201165 1.111169227 1.116474211 1.122479690 1.123464721 1.134539087 1.144350705 1.161317643 1.169849873 1.172956288 1.176006849 1.200540663 1.215853541 1.222468335 1.247319250 1.295174939 1.295987392 1.314201124 1.324052349 1.326328705 1.327630529 1.330154311 1.334535270 1.341053423 1.346114406 1.362421362 1.378798635 1.380912066 1.381431424 1.395300964 1.493333905 1.557549060 1.671866210 1.900594083</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">105</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96846361" y3="-0.94115506" z3="-0.72114729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59257259" y3="-1.92647714" z3="-1.70583067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0714674" y3="-0.97815199" z3="-1.54251549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7499244" y3="1.48025936" z3="-1.13892493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32978091" y3="0.31806397" z3="-0.51741215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60698756" y3="2.70365037" z3="-1.07902752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97599833" y3="2.72698957" z3="-0.87731089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35394735" y3="4.96033621" z3="-0.29145854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76700149" y3="3.80909025" z3="-0.76111613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.72949684" y3="5.82749385" z3="-0.0543799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01836361" y3="1.56463426" z3="-1.54753401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22398267" y3="0.36354519" z3="0.28183315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75414881" y3="0.33386174" z3="-0.47515987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.7034624" y3="0.65259008" z3="0.52276924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68332062" y3="-0.91680856" z3="-1.32333707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14386857" y3="-2.56204714" z3="-1.19668027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32162106" y3="-5.57351105" z3="-6.10053801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00186392" y3="-5.13855828" z3="-5.14936996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16887884" y3="-3.99431397" z3="-2.73543529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.01745914" y3="-3.76006697" z3="-4.98484932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59739427" y3="-5.96371076" z3="-4.09701314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19774506" y3="-5.38577596" z3="-2.89892825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.61150149" y3="-3.15572132" z3="-3.78383027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.34021898" y3="-3.09432175" z3="-5.78899843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.607974" y3="-7.05147471" z3="-4.20172546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92393248" y3="-6.02032206" z3="-2.05194273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70626105" y3="-3.44451266" z3="-1.51320543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34408224" y3="-3.91214338" z3="-0.83020873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70262124" y3="-4.89664781" z3="-1.14048516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45775947" y3="-3.63929228" z3="0.6188101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.66730569" y3="-3.22467157" z3="3.37899475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.90907641" y3="-4.66764175" z3="1.45654736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12584383" y3="-2.39954699" z3="1.17415825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22795679" y3="-2.19498274" z3="2.54650553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.00663335" y3="-4.46248187" z3="2.83068742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.14766817" y3="-5.64810794" z3="1.03420522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.20029543" y3="-1.56523806" z3="0.55223518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0441124" y3="-1.21580716" z3="2.94964053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.32855586" y3="-5.28215151" z3="3.47889331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.73730043" y3="-3.06821065" z3="4.45935487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.62860596" y3="-1.82060956" z3="-3.74248539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.65896195" y3="-1.41768311" z3="-2.8272089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29065782" y3="3.66934545" z3="-0.84442702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05273234" y3="-2.96821546" z3="-1.76820538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9136382" y3="-3.13347809" z3="-0.68018369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12049063" y3="-2.27090975" z3="0.26042557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78755747" y3="-0.67554416" z3="0.50530807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.43154509" y3="-0.09271516" z3="-1.15198132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48186463" y3="0.37725417" z3="1.29018663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.20009526" y3="-0.98605669" z3="1.68730972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46899577" y3="-4.32504166" z3="-0.50665487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.28786573" y3="-4.54905203" z3="0.63085111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.64273913" y3="0.34999092" z3="-1.78289482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21064992" y3="0.67994536" z3="-0.99657489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.89615663" y3="-0.92316168" z3="-1.72006444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.53900556" y3="0.47898376" z3="0.7220396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2245089" y3="-0.03075833" z3="2.28776322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90637483" y3="1.38595515" z3="1.43774085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63704433" y3="-0.02020799" z3="2.00103688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00693906" y3="-1.58102329" z3="1.22505622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.85453124" y3="-1.51374835" z3="2.59541849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.18783252" y3="-3.9132489" z3="0.59390414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.73219256" y3="-4.35185513" z3="1.56057921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57864122" y3="-5.60663289" z3="0.57752581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37351116" y3="-2.1751822" z3="-0.14548041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18173001" y3="-3.29406447" z3="-0.96808859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51629151" y3="-4.42116854" z3="-0.50008977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.04149572" y3="-4.4209448" z3="0.80575912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.26105737" y3="-3.34966454" z3="1.66675979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.9271683" y3="-2.23071492" z3="1.18493994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50358075" y3="-3.26121875" z3="-2.0123698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32758828" y3="-5.27404186" z3="-1.1522415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23994773" y3="-5.55358298" z3="1.27498075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.88079021" y3="-3.39001993" z3="2.68816513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.07397541" y3="-1.37279338" z3="1.84189295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48651823" y3="3.97043935" z3="0.28276217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86452811" y3="3.80329118" z3="0.26755709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46572985" y3="3.345419" z3="-0.90259817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72580103" y3="3.05649304" z3="-2.04649698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34568194" y3="3.20845688" z3="-2.00608035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00208658" y3="4.3052361" z3="1.19774098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47336249" y3="4.01442948" z3="1.14745629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.91490713" y3="3.13579098" z3="-0.92281756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.23337798" y3="2.70993834" z3="-2.94850408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.24956326" y3="2.95907464" z3="-2.88706067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08595559" y3="-5.68519748" z3="2.46819499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75715268" y3="-6.28997679" z3="0.43474021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45841196" y3="3.02684739" z3="-2.00074199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49146418" y3="3.06123881" z3="0.14689369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53736303" y3="0.17846255" z3="-2.22088275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8548089" y3="1.4177947" z3="-2.04868209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.64460033" y3="0.11032947" z3="-3.11109614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.04317119" y3="1.21197191" z3="-3.82704155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.16638119" y3="-0.84461038" z3="-3.22665518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.89103539" y3="1.14609458" z3="-4.51448669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.27580673" y3="2.53323111" z3="-2.82539386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.34012266" y3="2.4329308" z3="-3.6888369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73555036" y3="3.4781468" z3="-2.73747459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.64207473" y3="3.30232753" z3="-4.27972683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57419594" y3="3.90926292" z3="-0.32917694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75283358" y3="5.04552467" z3="-0.07150471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95368577" y3="3.98772445" z3="0.01371237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49094608" y3="5.14175263" z3="0.53155631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59097993" y3="3.11325512" z3="-0.13069282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55348319" y3="5.175851" z3="0.78893753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34035621" y3="6.22998948" z3="0.45255212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68103835" y3="6.28344867" z3="0.74271492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69820995" y3="7.09765658" z3="0.63267904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12188589" y3="7.19757181" z3="1.14995985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23468008" y3="-3.88266652" z3="-2.96305067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47756062" y3="-4.91630409" z3="-2.6733837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.0544711" y3="-3.51160753" z3="-3.60712656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.31991565" y3="-3.89923056" z3="-3.57665181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.53521629" y3="-1.5936035" z3="-2.09275471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.22585577" y3="-1.06306952" z3="-2.77371548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.36751409" y3="-0.96770807" z3="-1.20086795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.5728307" y3="-1.66613897" z3="-2.62095752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9685,-.9412,-.7211;6.5926,-1.9265,-1.7058;6.0715,-.9782,-1.5425;4.7499,1.4803,-1.1389;4.3298,.3181,-.5174;2.607,2.7037,-1.079;3.976,2.727,-.8773;2.3539,4.9603,-.2915;1.767,3.8091,-.7611;1.7295,5.8275,-.0544;2.0184,1.5646,-1.5475;3.224,.3635,.2818;1.7541,.3339,-.4752;.7035,.6526,.5228;1.6833,-.9168,-1.3233;1.1439,-2.562,-1.1967;2.3216,-5.5735,-6.1005;2.0019,-5.1386,-5.1494;1.1689,-3.9943,-2.7354;2.0175,-3.7601,-4.9848;1.5974,-5.9637,-4.097;1.1977,-5.3858,-2.8989;1.6115,-3.1557,-3.7838;2.3402,-3.0943,-5.789;1.608,-7.0515,-4.2017;.9239,-6.0203,-2.0519;.7063,-3.4445,-1.5132;-.3441,-3.9121,-.8302;-.7026,-4.8966,-1.1405;-.4578,-3.6393,.6188;-.6673,-3.2247,3.379;-.9091,-4.6676,1.4565;-.1258,-2.3995,1.1742;-.228,-2.195,2.5465;-1.0066,-4.4625,2.8307;-1.1477,-5.6481,1.0342;.2003,-1.5652,.5522;.0441,-1.2158,2.9496;-1.3286,-5.2822,3.4789;-.7373,-3.0682,4.4594;1.6286,-1.8206,-3.7425;1.659,-1.4177,-2.8272;.2907,3.6693,-.8444;-2.0527,-2.9682,-1.7682;-2.9136,-3.1335,-.6802;-3.1205,-2.2709,.2604;-3.7876,-.6755,.5053;-4.4315,-.0927,-1.152;-2.4819,.3773,1.2902;-5.2001,-.9861,1.6873;-3.469,-4.325,-.5067;-4.2879,-4.5491,.6309;-3.6427,.35,-1.7829;-5.2106,.6799,-.9966;-4.8962,-.9232,-1.7201;-1.539,.479,.722;-2.2245,-.0308,2.2878;-2.9064,1.386,1.4377;-5.637,-.0202,2.001;-6.0069,-1.581,1.2251;-4.8545,-1.5137,2.5954;-5.1878,-3.9132,.5939;-3.7322,-4.3519,1.5606;-4.5786,-5.6066,.5775;4.3735,-2.1752,-.1455;4.1817,-3.2941,-.9681;3.5163,-4.4212,-.5001;3.0415,-4.4209,.8058;3.2611,-3.3497,1.6668;3.9272,-2.2307,1.1849;4.5036,-3.2612,-2.0124;3.3276,-5.274,-1.1522;2.2399,-5.5536,1.275;2.8808,-3.39,2.6882;4.074,-1.3728,1.8419;-.4865,3.9704,.2828;-1.8645,3.8033,.2676;-2.4657,3.3454,-.9026;-1.7258,3.0565,-2.0465;-.3457,3.2085,-2.0061;.0021,4.3052,1.1977;-2.4734,4.0144,1.1475;-3.9149,3.1358,-.9228;-2.2334,2.7099,-2.9485;.2496,2.9591,-2.8871;2.086,-5.6852,2.4682;1.7572,-6.29,.4347;-4.4584,3.0268,-2.0007;-4.4915,3.0612,.1469;6.5374,.1785,-2.2209;5.8548,1.4178,-2.0487;7.6446,.1103,-3.1111;8.0432,1.212,-3.827;8.1664,-.8446,-3.2267;8.891,1.1461,-4.5145;6.2758,2.5332,-2.8254;7.3401,2.4329,-3.6888;5.7356,3.4781,-2.7375;7.6421,3.3023,-4.2797;4.5742,3.9093,-.3292;3.7528,5.0455,-.0715;5.9537,3.9877,.0137;6.4909,5.1418,.5316;6.591,3.1133,-.1307;7.5535,5.1759,.7889;4.3404,6.23,.4526;5.681,6.2834,.7427;3.6982,7.0977,.6327;6.1219,7.1976,1.15;-2.2347,-3.8827,-2.9631;-2.4776,-4.9163,-2.6734;-3.0545,-3.5116,-3.6071;-1.3199,-3.8992,-3.5767;-1.5352,-1.5936,-2.0928;-2.2259,-1.0631,-2.7737;-1.3675,-.9677,-1.2009;-.5728,-1.6661,-2.621;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662369695465</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007486690551 0.000818598669 0.025128687759 0.005338186263</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055579243 -0.003863680 0.000172051 0.000209455 0.000312092 0.000354053 0.000418646 0.000469255 0.000537736 0.000634610 0.000761979 0.000820894 0.000976428 0.001092758 0.001244364 0.001259721 0.001279311 0.001401082 0.001512148 0.001678082 0.001782551 0.002126464 0.002237799 0.002630220 0.002993381 0.003262082 0.003664859 0.003759204 0.003929349 0.004419375 0.004817044 0.005046253 0.005116758 0.005625198 0.005852711 0.005938518 0.006623468 0.006873627 0.007226326 0.007729116 0.007849455 0.008611853 0.009252322 0.009272254 0.009758362 0.010379335 0.010812024 0.011667292 0.012709552 0.013005513 0.013264394 0.014438013 0.014570051 0.015209017 0.015474824 0.015664274 0.016015967 0.016349889 0.017760446 0.018037591 0.018334450 0.018766946 0.020142114 0.020596344 0.021435139 0.022334030 0.022637132 0.023254168 0.024243215 0.025054728 0.025499000 0.026192381 0.026577993 0.026805625 0.027777685 0.028298105 0.030030086 0.030439150 0.031952153 0.032578650 0.032962111 0.035101447 0.038572555 0.038726578 0.040699790 0.041114822 0.045005457 0.045203226 0.045393458 0.046588508 0.048360863 0.049674631 0.051467225 0.051626598 0.051824777 0.052280150 0.052361090 0.052564026 0.052965779 0.054195939 0.054951778 0.055579148 0.056496035 0.056883491 0.057155887 0.057769557 0.058626231 0.059222594 0.059809890 0.060777617 0.061465227 0.062510898 0.063001732 0.064231510 0.064621830 0.065743583 0.066258684 0.067858351 0.068372269 0.068740106 0.069711224 0.071580280 0.072390520 0.072822074 0.076530438 0.079006985 0.080864206 0.081015156 0.082841500 0.084507121 0.087859545 0.088651603 0.089567469 0.091102318 0.092971094 0.094194976 0.095322999 0.095825341 0.096707071 0.097814615 0.098983379 0.099867895 0.101246013 0.101639592 0.102909906 0.103093259 0.104206881 0.107293938 0.108943085 0.110637379 0.110895436 0.111892247 0.112827070 0.113467187 0.114677530 0.116467372 0.117231543 0.117988485 0.120890125 0.123771298 0.124543040 0.127425313 0.127803257 0.128840520 0.129701204 0.133248850 0.135028508 0.136138481 0.137140190 0.139508135 0.142800653 0.144615833 0.146117807 0.149557660 0.151327475 0.153019932 0.154947639 0.160132569 0.165953002 0.170935384 0.174591180 0.177718225 0.180811182 0.183417953 0.186475485 0.187779288 0.189588886 0.197225917 0.201852708 0.203593850 0.205420153 0.206195882 0.207155525 0.209100858 0.212030039 0.213046405 0.214224696 0.216303931 0.218349188 0.221622735 0.225008140 0.231547950 0.232758895 0.234278635 0.235869304 0.241753336 0.245776738 0.249589845 0.255111685 0.255492897 0.257012764 0.261335021 0.271386353 0.279494254 0.291227319 0.297836996 0.298903288 0.300374677 0.305733191 0.307057868 0.307591169 0.317888725 0.321029858 0.325245726 0.327740163 0.330018466 0.346994012 0.351135228 0.355334812 0.357852967 0.359341838 0.363889862 0.383229170 0.403574150 0.406099354 0.428816240 0.429927164 0.431137310 0.445750717 0.459081095 0.464550805 0.466309231 0.477887769 0.484504107 0.497424074 0.498047124 0.511072930 0.514616604 0.543062413 0.565485473 0.567180399 0.583485446 0.591045204 0.605359375 0.640743830 0.644689934 0.665566188 0.673898157 0.681967553 0.690420387 0.692283220 0.699249555 0.704244054 0.714976950 0.723796101 0.734943820 0.737662796 0.742471043 0.750708601 0.771587069 0.775920744 0.803789752 0.817275911 0.820512716 0.821689875 0.831920781 0.840967548 0.844289845 0.846823048 0.850888264 0.858721781 0.867299188 0.867365250 0.873262152 0.875089200 0.883287872 0.890057530 0.891100779 0.896674616 0.902148209 0.916199040 0.919567965 0.924302074 0.931075090 0.937298710 0.949614889 0.957604535 0.960315156 0.970069478 0.981930220 0.992506855 0.998447163 1.011387737 1.017533873 1.038746430 1.048886394 1.055298897 1.065861380 1.076347063 1.086844413 1.099634517 1.110201534 1.111169968 1.116525400 1.122479748 1.123465773 1.134539112 1.144402610 1.161323680 1.169857119 1.173006813 1.176037874 1.200541987 1.215953444 1.223021207 1.247327797 1.295183958 1.296008733 1.314219525 1.324328297 1.326330974 1.327666054 1.330155921 1.334539786 1.341054487 1.346115725 1.362421793 1.378799731 1.380912817 1.381431793 1.395659718 1.493366779 1.557554882 1.671866414 1.900604026</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">106</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96983721" y3="-0.94053884" z3="-0.71648805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59533138" y3="-1.92711329" z3="-1.69770042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07433652" y3="-0.97846531" z3="-1.5358955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75269714" y3="1.48055494" z3="-1.13658423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33155492" y3="0.31914521" z3="-0.51407383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60984004" y3="2.704278" z3="-1.07970295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97892062" y3="2.72789188" z3="-0.87777737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3562057" y3="4.96265053" z3="-0.29757848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.76908181" y3="3.81008164" z3="-0.7639152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73201882" y3="5.83038754" z3="-0.06355658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02162418" y3="1.56451412" z3="-1.54649933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22548872" y3="0.36579606" z3="0.28479001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75581009" y3="0.3358435" z3="-0.47241604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.7051415" y3="0.65665104" z3="0.52487786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6843181" y3="-0.91573166" z3="-1.31904712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14243819" y3="-2.55971087" z3="-1.19598204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32146809" y3="-5.56133109" z3="-6.10510955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00169586" y3="-5.12839336" z3="-5.1529732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1682982" y3="-3.98964974" z3="-2.73646094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.01524464" y3="-3.75001549" z3="-4.98603068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59870748" y3="-5.95589206" z3="-4.10186176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19886908" y3="-5.38072391" z3="-2.90246242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60837497" y3="-3.14849687" z3="-3.7838329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.33655333" y3="-3.08262219" z3="-5.78947087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61068306" y3="-7.04348507" z3="-4.20843611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92597614" y3="-6.0170653" z3="-2.05649582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70607546" y3="-3.4425523" z3="-1.51307653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3454173" y3="-3.91058507" z3="-0.83032082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70070168" y3="-4.89667763" z3="-1.13974594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45806687" y3="-3.63847267" z3="0.61891865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.67214856" y3="-3.22147388" z3="3.37845058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.91212135" y3="-4.66532648" z3="1.45652884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12499025" y3="-2.39925252" z3="1.17423745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22932697" y3="-2.19342582" z3="2.54617339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.01212145" y3="-4.45892907" z3="2.83024518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.15166587" y3="-5.64510143" z3="1.03428584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2029964" y3="-1.56574002" z3="0.55192941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0431662" y3="-1.21421945" z3="2.94904203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.33680276" y3="-5.27733901" z3="3.4780873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.74446408" y3="-3.06368879" z3="4.45847296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.6200396" y3="-1.81329551" z3="-3.7384757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.65991694" y3="-1.41339259" z3="-2.82587334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.292907" y3="3.66872263" z3="-0.84759241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05020466" y3="-2.97081321" z3="-1.76592954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91373038" y3="-3.13883762" z3="-0.67950112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12238099" y3="-2.2783639" z3="0.26206442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.78853306" y3="-0.68275533" z3="0.50680626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.44373863" y3="-0.10151448" z3="-1.14181449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48147477" y3="0.37285177" z3="1.29101458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19826932" y3="-0.99420639" z3="1.69924622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46961597" y3="-4.32944051" z3="-0.5091828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.29164146" y3="-4.55542063" z3="0.62580352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.66195177" y3="0.33030785" z3="-1.78229118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.20437879" y3="0.68009439" z3="-0.98422548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.92128532" y3="-0.92543205" z3="-1.69495516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.54312215" y3="0.47645689" z3="0.71750419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21440598" y3="-0.02850581" z3="2.28072994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90766007" y3="1.38420294" z3="1.43573303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63623661" y3="-0.0302896" z3="2.01551352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00351384" y3="-1.59433171" z3="1.2415519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.84322213" y3="-1.5157393" z3="2.60350366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19306324" y3="-3.92189523" z3="0.58467955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.73986344" y3="-4.35572132" z3="1.55744153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57965833" y3="-5.613902" z3="0.57254853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.37272626" y3="-2.17457043" z3="-0.14305016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18150951" y3="-3.29201649" z3="-0.9677687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51369537" y3="-4.41905774" z3="-0.50307361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.03614112" y3="-4.4203676" z3="0.80174742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.25521447" y3="-3.35075397" z3="1.66494484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.9235149" y3="-2.23167021" z3="1.18630964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50556272" y3="-3.25785782" z3="-2.0113242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32507671" y3="-5.27035575" z3="-1.15732725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2319654" y3="-5.55256154" z3="1.26725151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.87251675" y3="-3.392228" z3="2.68541098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06987668" y3="-1.37498497" z3="1.84497975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4848759" y3="3.97104029" z3="0.27758476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8642087" y3="3.80486766" z3="0.26019275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.46275176" y3="3.3411432" z3="-0.90463988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.72191513" y3="3.04939231" z3="-2.04622973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.34184821" y3="3.20415736" z3="-2.0077826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01093443" y3="4.29889588" z3="1.19859456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47261245" y3="4.01380973" z3="1.14120536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.912919" y3="3.1323632" z3="-0.92660046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.22889136" y3="2.69867375" z3="-2.94575405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.25355284" y3="2.95424061" z3="-2.88766068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07806044" y3="-5.68804111" z3="2.46005481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74674022" y3="-6.28473164" z3="0.42448283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.45491764" y3="3.01543578" z3="-2.00302082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49076219" y3="3.06524799" z3="0.14185363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54170465" y3="0.17736688" z3="-2.21444237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8586613" y3="1.41680103" z3="-2.04505041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.65067504" y3="0.10812837" z3="-3.10249741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.05027841" y3="1.20875944" z3="-3.81942932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17292419" y3="-0.84687236" z3="-3.21548323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.89955603" y3="1.14208854" z3="-4.50511356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.28051596" y3="2.5310279" z3="-2.82313119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.34641025" y3="2.42964787" z3="-3.68460772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.73976375" y3="3.47590178" z3="-2.73786536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.64904081" y3="3.29816219" z3="-4.27648832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5768674" y3="3.91155571" z3="-0.33233875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75545225" y3="5.04849602" z3="-0.07799061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95624202" y3="3.99080597" z3="0.01076198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49353738" y3="5.14626989" z3="0.5253293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59323762" y3="3.11577259" z3="-0.13080175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55595923" y3="5.18098515" z3="0.78280312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34296296" y3="6.23434307" z3="0.44307885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68365593" y3="6.28858274" z3="0.73315315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70071495" y3="7.10250353" z3="0.62121663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12440059" y3="7.20384032" z3="1.13797153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23285693" y3="-3.88220378" z3="-2.96275196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47372471" y3="-4.9168124" z3="-2.67469069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.05393802" y3="-3.5111784" z3="-3.60517405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.31883609" y3="-3.89571772" z3="-3.57736511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.53879485" y3="-1.59310333" z3="-2.08792466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.23320017" y3="-1.06428691" z3="-2.76526504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.36863001" y3="-0.96821686" z3="-1.1963594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.57714146" y3="-1.66260577" z3="-2.61880809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9698,-.9405,-.7165;6.5953,-1.9271,-1.6977;6.0743,-.9785,-1.5359;4.7527,1.4806,-1.1366;4.3316,.3191,-.5141;2.6098,2.7043,-1.0797;3.9789,2.7279,-.8778;2.3562,4.9627,-.2976;1.7691,3.8101,-.7639;1.732,5.8304,-.0636;2.0216,1.5645,-1.5465;3.2255,.3658,.2848;1.7558,.3358,-.4724;.7051,.6567,.5249;1.6843,-.9157,-1.319;1.1424,-2.5597,-1.196;2.3215,-5.5613,-6.1051;2.0017,-5.1284,-5.153;1.1683,-3.9896,-2.7365;2.0152,-3.75,-4.986;1.5987,-5.9559,-4.1019;1.1989,-5.3807,-2.9025;1.6084,-3.1485,-3.7838;2.3366,-3.0826,-5.7895;1.6107,-7.0435,-4.2084;.926,-6.0171,-2.0565;.7061,-3.4426,-1.5131;-.3454,-3.9106,-.8303;-.7007,-4.8967,-1.1397;-.4581,-3.6385,.6189;-.6721,-3.2215,3.3785;-.9121,-4.6653,1.4565;-.125,-2.3993,1.1742;-.2293,-2.1934,2.5462;-1.0121,-4.4589,2.8302;-1.1517,-5.6451,1.0343;.203,-1.5657,.5519;.0432,-1.2142,2.949;-1.3368,-5.2773,3.4781;-.7445,-3.0637,4.4585;1.62,-1.8133,-3.7385;1.6599,-1.4134,-2.8259;.2929,3.6687,-.8476;-2.0502,-2.9708,-1.7659;-2.9137,-3.1388,-.6795;-3.1224,-2.2784,.2621;-3.7885,-.6828,.5068;-4.4437,-.1015,-1.1418;-2.4815,.3729,1.291;-5.1983,-.9942,1.6992;-3.4696,-4.3294,-.5092;-4.2916,-4.5554,.6258;-3.662,.3303,-1.7823;-5.2044,.6801,-.9842;-4.9213,-.9254,-1.695;-1.5431,.4765,.7175;-2.2144,-.0285,2.2807;-2.9077,1.3842,1.4357;-5.6362,-.0303,2.0155;-6.0035,-1.5943,1.2416;-4.8432,-1.5157,2.6035;-5.1931,-3.9219,.5847;-3.7399,-4.3557,1.5574;-4.5797,-5.6139,.5725;4.3727,-2.1746,-.1431;4.1815,-3.292,-.9678;3.5137,-4.4191,-.5031;3.0361,-4.4204,.8017;3.2552,-3.3508,1.6649;3.9235,-2.2317,1.1863;4.5056,-3.2579,-2.0113;3.3251,-5.2704,-1.1573;2.232,-5.5526,1.2673;2.8725,-3.3922,2.6854;4.0699,-1.375,1.845;-.4849,3.971,.2776;-1.8642,3.8049,.2602;-2.4628,3.3411,-.9046;-1.7219,3.0494,-2.0462;-.3418,3.2042,-2.0078;.0109,4.2989,1.1986;-2.4726,4.0138,1.1412;-3.9129,3.1324,-.9266;-2.2289,2.6987,-2.9458;.2536,2.9542,-2.8877;2.0781,-5.688,2.4601;1.7467,-6.2847,.4245;-4.4549,3.0154,-2.003;-4.4908,3.0652,.1419;6.5417,.1774,-2.2144;5.8587,1.4168,-2.0451;7.6507,.1081,-3.1025;8.0503,1.2088,-3.8194;8.1729,-.8469,-3.2155;8.8996,1.1421,-4.5051;6.2805,2.531,-2.8231;7.3464,2.4296,-3.6846;5.7398,3.4759,-2.7379;7.649,3.2982,-4.2765;4.5769,3.9116,-.3323;3.7555,5.0485,-.078;5.9562,3.9908,.0108;6.4935,5.1463,.5253;6.5932,3.1158,-.1308;7.556,5.181,.7828;4.343,6.2343,.4431;5.6837,6.2886,.7332;3.7007,7.1025,.6212;6.1244,7.2038,1.138;-2.2329,-3.8822,-2.9628;-2.4737,-4.9168,-2.6747;-3.0539,-3.5112,-3.6052;-1.3188,-3.8957,-3.5774;-1.5388,-1.5931,-2.0879;-2.2332,-1.0643,-2.7653;-1.3686,-.9682,-1.1964;-.5771,-1.6626,-2.6188;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662388291250</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005387158622 0.000782763391 0.019139879116 0.005336874023</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055621544 -0.003478468 0.000153725 0.000178290 0.000313152 0.000365522 0.000400380 0.000454860 0.000536459 0.000634877 0.000764078 0.000822520 0.000983272 0.001091759 0.001243890 0.001258502 0.001284770 0.001400142 0.001512323 0.001683718 0.001782647 0.002140923 0.002242520 0.002628394 0.003018226 0.003279206 0.003672793 0.003761006 0.003969302 0.004421688 0.004836311 0.005076005 0.005116799 0.005648943 0.005863404 0.005938262 0.006625033 0.006910657 0.007226491 0.007801422 0.007917404 0.008628908 0.009271362 0.009446254 0.009922713 0.010474797 0.010838828 0.011688481 0.012712029 0.013029402 0.013274069 0.014440286 0.014575731 0.015230081 0.015478800 0.015665291 0.016016914 0.016360133 0.017763347 0.018098624 0.018427039 0.018843303 0.020148019 0.020840844 0.021427718 0.022461261 0.022668939 0.023254873 0.024241951 0.025242932 0.025498539 0.026189911 0.026592958 0.026810783 0.027780480 0.028336202 0.030031793 0.030439373 0.031985148 0.032613988 0.032991649 0.035107131 0.038592351 0.038726404 0.040702051 0.041114495 0.045024104 0.045204733 0.045394983 0.046637713 0.048387192 0.049674639 0.051468340 0.051627653 0.051824756 0.052280104 0.052360886 0.052564023 0.052964388 0.054197670 0.054950858 0.055581512 0.056496197 0.056883780 0.057156673 0.057770371 0.058632169 0.059222681 0.059818489 0.060778277 0.061482923 0.062524055 0.063556988 0.064322316 0.064622095 0.065978446 0.066503481 0.067936870 0.068540644 0.068887946 0.070296228 0.071581115 0.072395322 0.072823306 0.076535253 0.079099765 0.080865694 0.081128468 0.082843188 0.084605915 0.087858221 0.088658743 0.089567492 0.091106980 0.092975644 0.094194943 0.095323035 0.095828748 0.096708365 0.097819033 0.098983797 0.099868330 0.101246312 0.101646758 0.102910141 0.103098128 0.104206992 0.107295566 0.108943239 0.110635577 0.110957163 0.111899115 0.112827355 0.113528955 0.114691324 0.116469151 0.117231915 0.118034152 0.120989450 0.124017776 0.124546530 0.127427818 0.127819256 0.128923452 0.130238334 0.133249388 0.135124018 0.136139885 0.137150381 0.139593416 0.142902781 0.144678049 0.146116512 0.149575816 0.151335474 0.153026597 0.155248813 0.160131538 0.165987070 0.170937743 0.174593317 0.177731121 0.180811522 0.183418936 0.186475228 0.187779359 0.189635363 0.197230436 0.201854689 0.203857766 0.205420128 0.206205813 0.207155588 0.209102217 0.212098769 0.213065380 0.214254153 0.216317642 0.218345403 0.221628330 0.225008260 0.231550693 0.232759612 0.234279759 0.235867681 0.242425600 0.245815673 0.249623170 0.255138471 0.255494521 0.257024643 0.261340095 0.271386489 0.279520665 0.291254979 0.297841882 0.298907417 0.300391117 0.305763342 0.307059284 0.307596266 0.317908191 0.321032183 0.325276300 0.327752418 0.330017395 0.347003454 0.351138720 0.355341181 0.357851923 0.359342592 0.363890926 0.383237506 0.404707332 0.406103934 0.429211206 0.429929680 0.431337848 0.445755197 0.459127085 0.464570975 0.466369823 0.477887771 0.484503762 0.497484311 0.498050387 0.511771256 0.514694835 0.543063892 0.565487220 0.567198182 0.583499998 0.591165840 0.605416256 0.640807015 0.644690794 0.665570307 0.673919495 0.682003570 0.691458304 0.693580817 0.699279652 0.704244184 0.714992291 0.724103971 0.735099013 0.737665229 0.743648744 0.750708982 0.771589014 0.775922479 0.803794979 0.817287649 0.820515394 0.821918927 0.832032407 0.841096784 0.844297175 0.846823065 0.850890054 0.858736826 0.867323119 0.867386726 0.873296969 0.875206591 0.883290343 0.890097857 0.891153757 0.896811754 0.902254636 0.916206310 0.919592056 0.924334430 0.931147725 0.937370444 0.949701924 0.957955889 0.960957325 0.970088198 0.981968212 0.994770448 0.998452020 1.011390162 1.017939512 1.038782380 1.048930193 1.055300009 1.066376462 1.076347375 1.086864575 1.099859264 1.110202909 1.111196728 1.116551573 1.122479957 1.123466938 1.134539212 1.144416624 1.161326069 1.169860022 1.173046771 1.176063952 1.200543044 1.216019951 1.223368516 1.247328349 1.295186831 1.296008579 1.314219786 1.324369514 1.326331029 1.327678005 1.330156027 1.334541495 1.341054994 1.346125567 1.362421922 1.378801246 1.380913246 1.381433846 1.395668489 1.493720000 1.557556064 1.671867515 1.900808912</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">107</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9696179" y3="-0.94057546" z3="-0.71151317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59703163" y3="-1.92878223" z3="-1.68771727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0762676" y3="-0.97967626" z3="-1.52790308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75483294" y3="1.48027295" z3="-1.13417656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.33196346" y3="0.31969496" z3="-0.51109543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61254813" y3="2.70524039" z3="-1.08100417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9814716" y3="2.72846774" z3="-0.87815784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.35918902" y3="4.9654681" z3="-0.30392601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77222158" y3="3.81191175" z3="-0.76775698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73487825" y3="5.83397084" z3="-0.07140267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02349485" y3="1.56547603" z3="-1.54676623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22518125" y3="0.36763298" z3="0.28652857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7556504" y3="0.33849378" z3="-0.47112058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.70491318" y3="0.66113954" z3="0.52550577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68305326" y3="-0.91353015" z3="-1.31704437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.14030392" y3="-2.55571753" z3="-1.19629699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32246594" y3="-5.54890066" z3="-6.1090805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00182128" y3="-5.11785349" z3="-5.15637679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16691528" y3="-3.9838008" z3="-2.73795639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.01212776" y3="-3.73968622" z3="-4.98793405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60116797" y3="-5.94743969" z3="-4.1060045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20039338" y3="-5.37462143" z3="-2.90574233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60468069" y3="-3.14065584" z3="-3.78480289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.33148693" y3="-3.07040353" z3="-5.79059347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61563666" y3="-7.0348681" z3="-4.21390522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92927989" y3="-6.01258639" z3="-2.06042426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70457867" y3="-3.43865914" z3="-1.5136768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34676994" y3="-3.90756477" z3="-0.83119721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69958276" y3="-4.89507249" z3="-1.13957509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45885393" y3="-3.63586597" z3="0.61838315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.67384132" y3="-3.217957" z3="3.37796961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.91340009" y3="-4.66242461" z3="1.45648513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12548816" y3="-2.39651175" z3="1.17344246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.23012277" y3="-2.19036332" z3="2.54531641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.01409773" y3="-4.45553887" z3="2.83010775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.15277065" y3="-5.64277776" z3="1.03477794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.2035429" y3="-1.56354392" z3="0.55124995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0430145" y3="-1.21138028" z3="2.94798287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.33964848" y3="-5.27356903" z3="3.47835984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.74671093" y3="-3.05985591" z3="4.45787655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.6144018" y3="-1.80536965" z3="-3.73893512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.6537122" y3="-1.40635044" z3="-2.82403694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29608368" y3="3.66969942" z3="-0.85094769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05226934" y3="-2.97181785" z3="-1.76497871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91647385" y3="-3.1407667" z3="-0.67843203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1266683" y3="-2.28115082" z3="0.26332115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79242161" y3="-0.68643216" z3="0.51428024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.45776982" y3="-0.10899802" z3="-1.13123256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.4840464" y3="0.37205168" z3="1.28480271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19197108" y3="-1.00171227" z3="1.71283841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.47039791" y3="-4.33253679" z3="-0.50959482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.29312089" y3="-4.56172025" z3="0.62394882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.67424453" y3="0.324603" z3="-1.77609469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22351866" y3="0.67236682" z3="-0.96825916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.93538119" y3="-0.94012885" z3="-1.68840452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.54276073" y3="0.47638471" z3="0.70997993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21571357" y3="-0.03213051" z3="2.27951377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.90989262" y3="1.37996699" z3="1.4337829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62950626" y3="-0.03757465" z3="2.0304848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00212709" y3="-1.6009375" z3="1.25951983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.83379183" y3="-1.52734722" z3="2.61762531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19696247" y3="-3.93216392" z3="0.58155414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.7433099" y3="-4.35993336" z3="1.55589222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57692706" y3="-5.62098793" z3="0.57007409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36982926" y3="-2.17457552" z3="-0.14068227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.18032614" y3="-3.29062805" z3="-0.96776593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51154003" y3="-4.41857939" z3="-0.50668731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.03127406" y3="-4.42233624" z3="0.79713606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.24781879" y3="-3.35384519" z3="1.66250157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.91692452" y3="-2.23364653" z3="1.18736392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5067456" y3="-3.25455957" z3="-2.01052404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32441777" y3="-5.26849992" z3="-1.16320079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22732872" y3="-5.55613455" z3="1.25933597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.86265243" y3="-3.39717467" z3="2.6819808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.06139895" y3="-1.37800472" z3="1.84789228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48152166" y3="3.97016619" z3="0.27591378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86027236" y3="3.80235187" z3="0.25891874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45961134" y3="3.33961182" z3="-0.90815677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.71990795" y3="3.05194582" z3="-2.05401385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33969821" y3="3.20695259" z3="-2.01345437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00652369" y3="4.30660843" z3="1.19033069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4699416" y3="4.01352172" z3="1.13734001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90582659" y3="3.12176777" z3="-0.92514997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.22759663" y3="2.7020501" z3="-2.95484326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.25595436" y3="2.95696978" z3="-2.89338028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07283791" y3="-5.69469464" z3="2.45179484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74300328" y3="-6.28668695" z3="0.41445777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44577173" y3="3.00110385" z3="-2.00469743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48553306" y3="3.05567641" z3="0.14305034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54586557" y3="0.17525225" z3="-2.20635672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86247008" y3="1.41494301" z3="-2.04044719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.65721819" y3="0.10463942" z3="-3.09128294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.05863088" y3="1.20412384" z3="-3.80890788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17982747" y3="-0.85053173" z3="-3.2013345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.9097952" y3="1.13645366" z3="-4.49214621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.2859804" y3="2.5277822" z3="-2.81959698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.35407037" y3="2.42507273" z3="-3.67811695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7448318" y3="3.47270799" z3="-2.73752373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.65791891" y3="3.29255871" z3="-4.27087042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57957966" y3="3.9132979" z3="-0.33524217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75843593" y3="5.05135059" z3="-0.08433108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95886825" y3="3.99296628" z3="0.0082777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49649693" y3="5.14977304" z3="0.51944152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59565462" y3="3.11723283" z3="-0.13050351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55887488" y3="5.18478895" z3="0.77710468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34647328" y3="6.23854263" z3="0.43311538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68712594" y3="6.29313509" z3="0.72329228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70483336" y3="7.10756245" z3="0.60778486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12828775" y3="7.2094883" z3="1.12519653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23321265" y3="-3.8838044" z3="-2.9622797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47005384" y3="-4.91952413" z3="-2.67423623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.05606594" y3="-3.51542118" z3="-3.60417427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.31941694" y3="-3.89418276" z3="-3.57736225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.54328265" y3="-1.59258412" z3="-2.08648987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.23716455" y3="-1.06202476" z3="-2.76215995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.37582656" y3="-0.97164105" z3="-1.1921969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.57581408" y3="-1.66125185" z3="-2.61369051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9696,-.9406,-.7115;6.597,-1.9288,-1.6877;6.0763,-.9797,-1.5279;4.7548,1.4803,-1.1342;4.332,.3197,-.5111;2.6125,2.7052,-1.081;3.9815,2.7285,-.8782;2.3592,4.9655,-.3039;1.7722,3.8119,-.7678;1.7349,5.834,-.0714;2.0235,1.5655,-1.5468;3.2252,.3676,.2865;1.7557,.3385,-.4711;.7049,.6611,.5255;1.6831,-.9135,-1.317;1.1403,-2.5557,-1.1963;2.3225,-5.5489,-6.1091;2.0018,-5.1179,-5.1564;1.1669,-3.9838,-2.738;2.0121,-3.7397,-4.9879;1.6012,-5.9474,-4.106;1.2004,-5.3746,-2.9057;1.6047,-3.1407,-3.7848;2.3315,-3.0704,-5.7906;1.6156,-7.0349,-4.2139;.9293,-6.0126,-2.0604;.7046,-3.4387,-1.5137;-.3468,-3.9076,-.8312;-.6996,-4.8951,-1.1396;-.4589,-3.6359,.6184;-.6738,-3.218,3.378;-.9134,-4.6624,1.4565;-.1255,-2.3965,1.1734;-.2301,-2.1904,2.5453;-1.0141,-4.4555,2.8301;-1.1528,-5.6428,1.0348;.2035,-1.5635,.5512;.043,-1.2114,2.948;-1.3396,-5.2736,3.4784;-.7467,-3.0599,4.4579;1.6144,-1.8054,-3.7389;1.6537,-1.4064,-2.824;.2961,3.6697,-.8509;-2.0523,-2.9718,-1.765;-2.9165,-3.1408,-.6784;-3.1267,-2.2812,.2633;-3.7924,-.6864,.5143;-4.4578,-.109,-1.1312;-2.484,.3721,1.2848;-5.192,-1.0017,1.7128;-3.4704,-4.3325,-.5096;-4.2931,-4.5617,.6239;-3.6742,.3246,-1.7761;-5.2235,.6724,-.9683;-4.9354,-.9401,-1.6884;-1.5428,.4764,.71;-2.2157,-.0321,2.2795;-2.9099,1.38,1.4338;-5.6295,-.0376,2.0305;-6.0021,-1.6009,1.2595;-4.8338,-1.5273,2.6176;-5.197,-3.9322,.5816;-3.7433,-4.3599,1.5559;-4.5769,-5.621,.5701;4.3698,-2.1746,-.1407;4.1803,-3.2906,-.9678;3.5115,-4.4186,-.5067;3.0313,-4.4223,.7971;3.2478,-3.3538,1.6625;3.9169,-2.2336,1.1874;4.5067,-3.2546,-2.0105;3.3244,-5.2685,-1.1632;2.2273,-5.5561,1.2593;2.8627,-3.3972,2.682;4.0614,-1.378,1.8479;-.4815,3.9702,.2759;-1.8603,3.8024,.2589;-2.4596,3.3396,-.9082;-1.7199,3.0519,-2.054;-.3397,3.207,-2.0135;.0065,4.3066,1.1903;-2.4699,4.0135,1.1373;-3.9058,3.1218,-.9251;-2.2276,2.7021,-2.9548;.256,2.957,-2.8934;2.0728,-5.6947,2.4518;1.743,-6.2867,.4145;-4.4458,3.0011,-2.0047;-4.4855,3.0557,.1431;6.5459,.1753,-2.2064;5.8625,1.4149,-2.0404;7.6572,.1046,-3.0913;8.0586,1.2041,-3.8089;8.1798,-.8505,-3.2013;8.9098,1.1365,-4.4921;6.286,2.5278,-2.8196;7.3541,2.4251,-3.6781;5.7448,3.4727,-2.7375;7.6579,3.2926,-4.2709;4.5796,3.9133,-.3352;3.7584,5.0514,-.0843;5.9589,3.993,.0083;6.4965,5.1498,.5194;6.5957,3.1172,-.1305;7.5589,5.1848,.7771;4.3465,6.2385,.4331;5.6871,6.2931,.7233;3.7048,7.1076,.6078;6.1283,7.2095,1.1252;-2.2332,-3.8838,-2.9623;-2.4701,-4.9195,-2.6742;-3.0561,-3.5154,-3.6042;-1.3194,-3.8942,-3.5774;-1.5433,-1.5926,-2.0865;-2.2372,-1.062,-2.7622;-1.3758,-.9716,-1.1922;-.5758,-1.6613,-2.6137;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662412492131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005083965184 0.000785052455 0.021025133160 0.005337398835</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055621571 -0.003515272 0.000168642 0.000177142 0.000317589 0.000366074 0.000398645 0.000485727 0.000537515 0.000634806 0.000765320 0.000822992 0.000983467 0.001091481 0.001243684 0.001258061 0.001285644 0.001400506 0.001512760 0.001690050 0.001783494 0.002142190 0.002245860 0.002636019 0.003017401 0.003282261 0.003676239 0.003777175 0.004021461 0.004421291 0.004847444 0.005080047 0.005159771 0.005648208 0.005862892 0.005938916 0.006625183 0.006931761 0.007226744 0.007812494 0.007957204 0.008627481 0.009274697 0.009542747 0.010103600 0.010588022 0.010890283 0.011712395 0.012733390 0.013052553 0.013287096 0.014446562 0.014579913 0.015269369 0.015517471 0.015665436 0.016025943 0.016367601 0.017767189 0.018162571 0.018425869 0.018867296 0.020176606 0.020961021 0.021510360 0.022539964 0.022699275 0.023255080 0.024261915 0.025252887 0.025561022 0.026215232 0.026592227 0.026823659 0.027782736 0.028339339 0.030032003 0.030439475 0.032053569 0.032638009 0.032991758 0.035107583 0.038597819 0.038734033 0.040708353 0.041114630 0.045023654 0.045223408 0.045413397 0.046640648 0.048390543 0.049674721 0.051471174 0.051632856 0.051826591 0.052280368 0.052361684 0.052564824 0.052980789 0.054197720 0.054955001 0.055582319 0.056496336 0.056883895 0.057157580 0.057773165 0.058642322 0.059222746 0.059823644 0.060778115 0.061490218 0.062538251 0.063822014 0.064478511 0.064625010 0.066061883 0.066783812 0.067970280 0.068616785 0.069173636 0.071010955 0.071587606 0.072394598 0.072824643 0.076540740 0.079152965 0.080865619 0.081205247 0.082847095 0.084624337 0.087880539 0.088658012 0.089567665 0.091107475 0.092975682 0.094197418 0.095323205 0.095832563 0.096709224 0.097833316 0.099033899 0.099870461 0.101246161 0.101649964 0.102916872 0.103103394 0.104213082 0.107320266 0.108944725 0.110654268 0.111070310 0.111931161 0.112846676 0.113754063 0.114707970 0.116472424 0.117232722 0.118116288 0.120992292 0.124020589 0.124545944 0.127451589 0.127840375 0.129034175 0.131940195 0.133249951 0.135198369 0.136140823 0.137149797 0.139777883 0.143118258 0.144851295 0.146117674 0.149658947 0.151361483 0.153028992 0.155626679 0.160133334 0.166000415 0.170938592 0.174593141 0.177735081 0.180811629 0.183424177 0.186484872 0.187780204 0.189636949 0.197258808 0.201855656 0.203954149 0.205420141 0.206217411 0.207155766 0.209103678 0.212131044 0.213067092 0.214296594 0.216336963 0.218356467 0.221668011 0.225008582 0.231550782 0.232760793 0.234280215 0.235868689 0.242723663 0.245855193 0.249627087 0.255146212 0.255499429 0.257037134 0.261342823 0.271386741 0.279523906 0.291270182 0.297844799 0.298907260 0.300399721 0.305771061 0.307059465 0.307597127 0.317943117 0.321032262 0.325282693 0.327781707 0.330021567 0.347003609 0.351139845 0.355340957 0.357928349 0.359342995 0.363894268 0.383280194 0.404979806 0.406118719 0.429401087 0.429930271 0.431495654 0.445758927 0.459295006 0.464578385 0.466462230 0.477887777 0.484509301 0.497606302 0.498053335 0.512437485 0.514856153 0.543066006 0.565490286 0.567216160 0.583499928 0.591206806 0.605445225 0.640810037 0.644691376 0.665583492 0.673922749 0.682003115 0.691650005 0.695497315 0.699336859 0.704244288 0.715013037 0.724214330 0.735215695 0.737665182 0.744112670 0.750708981 0.771589562 0.775922608 0.803890978 0.817320191 0.820523844 0.821971826 0.832152584 0.841142367 0.844427755 0.846849152 0.851010940 0.858792180 0.867348983 0.868026952 0.873367713 0.875255672 0.883330648 0.890290911 0.891403773 0.896894526 0.902253930 0.916242514 0.919860900 0.924345023 0.931222982 0.937598693 0.949891470 0.958351722 0.962565337 0.970187679 0.981975202 0.995685123 0.998465243 1.011412656 1.018226309 1.038823047 1.048947836 1.055300012 1.066987827 1.076354094 1.086891068 1.100014409 1.110208292 1.111257885 1.116553637 1.122480575 1.123470937 1.134539685 1.144419663 1.161326683 1.169864496 1.173059676 1.176089022 1.200543317 1.216102216 1.223687963 1.247333715 1.295191012 1.296011133 1.314220705 1.324370677 1.326331258 1.327686022 1.330157543 1.334542705 1.341055270 1.346125479 1.362424695 1.378801411 1.380913596 1.381436130 1.395685082 1.494375546 1.557556693 1.671868831 1.901219997</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">108</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9665279" y3="-0.94093892" z3="-0.70719947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59638085" y3="-1.93076451" z3="-1.67775679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07569443" y3="-0.98123611" z3="-1.52016306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75466548" y3="1.48002515" z3="-1.13168532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32969459" y3="0.32008157" z3="-0.50859197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61341214" y3="2.7081884" z3="-1.08230921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9822235" y3="2.72957269" z3="-0.87797751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36265975" y3="4.97038746" z3="-0.31010835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77439048" y3="3.81697243" z3="-0.77263938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73944838" y3="5.84007815" z3="-0.07988934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0234473" y3="1.56851525" z3="-1.54692757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.22198692" y3="0.36936748" z3="0.28776456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75321573" y3="0.34226096" z3="-0.4712115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.70188304" y3="0.66575995" z3="0.52456911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68002549" y3="-0.90966926" z3="-1.31726961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13805032" y3="-2.55071812" z3="-1.19718859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32541499" y3="-5.53762867" z3="-6.11210542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00349783" y3="-5.10785575" z3="-5.1592823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16580031" y3="-3.97701822" z3="-2.7405096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.00985899" y3="-3.72973013" z3="-4.99045548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60526763" y3="-5.93897887" z3="-4.10916641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20282964" y3="-5.36767954" z3="-2.9087454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.60115614" y3="-3.13210447" z3="-3.78702575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.32717416" y3="-3.05919733" z3="-5.79289218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62299916" y3="-7.02633368" z3="-4.21737307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93370375" y3="-6.00666649" z3="-2.06352771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70274739" y3="-3.43360616" z3="-1.51558549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34488493" y3="-3.90700788" z3="-0.8313782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69767045" y3="-4.89388185" z3="-1.14056111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45785692" y3="-3.63390578" z3="0.61784955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.67237567" y3="-3.21560071" z3="3.37725402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.91079163" y3="-4.66084304" z3="1.45607856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12655333" y3="-2.39364239" z3="1.17253495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.23073908" y3="-2.18739562" z3="2.54439329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.01114282" y3="-4.45377715" z3="2.82970835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.14877292" y3="-5.64157503" z3="1.03455705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.20093725" y3="-1.56020842" z3="0.55007185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0413152" y3="-1.20788107" z3="2.9468102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.33486895" y3="-5.27231111" z3="3.47814528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.7444977" y3="-3.0576046" z3="4.45721209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.60731943" y3="-1.79690237" z3="-3.74073586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.64561565" y3="-1.39876854" z3="-2.82500307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29810207" y3="3.67641448" z3="-0.85747694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05608952" y3="-2.97239061" z3="-1.76376773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91757175" y3="-3.1442482" z3="-0.67683471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12762778" y3="-2.28624516" z3="0.26653899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.79693121" y3="-0.69368708" z3="0.51852551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.46756405" y3="-0.11488116" z3="-1.12845547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.48701138" y3="0.36941982" z3="1.28890782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19140345" y3="-1.01045625" z3="1.72463411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46885999" y3="-4.33782826" z3="-0.50739585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.29094822" y3="-4.56791128" z3="0.62653043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.6910784" y3="0.31235363" z3="-1.7796975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22659518" y3="0.67006203" z3="-0.96119327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.95640632" y3="-0.93961758" z3="-1.67339449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.55427057" y3="0.47497623" z3="0.70892286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21193979" y3="-0.02757636" z3="2.27935887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.91752393" y3="1.37814724" z3="1.43421886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62990202" y3="-0.04782818" z3="2.04479716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99909025" y3="-1.61421159" z3="1.27727558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.82435041" y3="-1.53034421" z3="2.62519891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19713569" y3="-3.94151176" z3="0.58295819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.74234464" y3="-4.36292804" z3="1.55861705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.57105792" y3="-5.62840339" z3="0.57413287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.36454258" y3="-2.17522154" z3="-0.13902858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17851304" y3="-3.29054038" z3="-0.96806663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51090308" y3="-4.420441" z3="-0.51004234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0280709" y3="-4.42700904" z3="0.79285751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.23994897" y3="-3.35882696" z3="1.65980949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.90779347" y3="-2.23650609" z3="1.18762781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50734436" y3="-3.25257029" z3="-2.01001657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32710306" y3="-5.26981543" z3="-1.1682654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22694373" y3="-5.56384683" z3="1.25243774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.85247825" y3="-3.40425979" z3="2.67835283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.04887706" y3="-1.38139602" z3="1.84961949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48047484" y3="3.97621155" z3="0.26774384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85792387" y3="3.8017935" z3="0.25315013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45479453" y3="3.33522517" z3="-0.91163926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.71403868" y3="3.04926969" z3="-2.05536367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3352452" y3="3.21042941" z3="-2.01730215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01227001" y3="4.30727012" z3="1.1877265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46614038" y3="4.00758943" z3="1.13647605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90411068" y3="3.11957572" z3="-0.93282854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21873488" y3="2.69652177" z3="-2.9546704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.2609148" y3="2.96318597" z3="-2.8976562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07152249" y3="-5.70473489" z3="2.44446834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74581326" y3="-6.29456755" z3="0.40590432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44572654" y3="2.99193216" z3="-2.00899674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48214576" y3="3.05878933" z3="0.13629943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54796636" y3="0.17284504" z3="-2.19804828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86438779" y3="1.41293436" z3="-2.03558943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66213697" y3="0.10063147" z3="-3.07932502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.06609107" y3="1.19894757" z3="-3.79723936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18486499" y3="-0.85483654" z3="-3.18626784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.91949338" y3="1.13014593" z3="-4.47756277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.29042067" y3="2.52434481" z3="-2.81540855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.3611097" y3="2.42009436" z3="-3.67056069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.74925578" y3="3.46952942" z3="-2.73658365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.66681794" y3="3.28658884" z3="-4.26375763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58148321" y3="3.91488189" z3="-0.33706073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76173776" y3="5.05470947" z3="-0.08966282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9606971" y3="3.99388382" z3="0.0069658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49966964" y3="5.15165832" z3="0.51462162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59658739" y3="3.11708053" z3="-0.12896692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56211035" y3="5.18620884" z3="0.77230955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35097912" y3="6.2427085" z3="0.42438921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69166733" y3="6.29666761" z3="0.71463096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71018181" y3="7.1130693" z3="0.59628839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13385324" y3="7.21384258" z3="1.11350571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23524725" y3="-3.88457993" z3="-2.96080972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.46957825" y3="-4.92064108" z3="-2.67311007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.05948288" y3="-3.51821813" z3="-3.60160843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32204798" y3="-3.89289475" z3="-3.57678907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.5477866" y3="-1.5934545" z3="-2.0848478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.24550415" y3="-1.06497735" z3="-2.76109808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.37864469" y3="-0.96835096" z3="-1.19247789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.59184923" y3="-1.65729292" z3="-2.62065813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9665,-.9409,-.7072;6.5964,-1.9308,-1.6778;6.0757,-.9812,-1.5202;4.7547,1.48,-1.1317;4.3297,.3201,-.5086;2.6134,2.7082,-1.0823;3.9822,2.7296,-.878;2.3627,4.9704,-.3101;1.7744,3.817,-.7726;1.7394,5.8401,-.0799;2.0234,1.5685,-1.5469;3.222,.3694,.2878;1.7532,.3423,-.4712;.7019,.6658,.5246;1.68,-.9097,-1.3173;1.1381,-2.5507,-1.1972;2.3254,-5.5376,-6.1121;2.0035,-5.1079,-5.1593;1.1658,-3.977,-2.7405;2.0099,-3.7297,-4.9905;1.6053,-5.939,-4.1092;1.2028,-5.3677,-2.9087;1.6012,-3.1321,-3.787;2.3272,-3.0592,-5.7929;1.623,-7.0263,-4.2174;.9337,-6.0067,-2.0635;.7027,-3.4336,-1.5156;-.3449,-3.907,-.8314;-.6977,-4.8939,-1.1406;-.4579,-3.6339,.6178;-.6724,-3.2156,3.3773;-.9108,-4.6608,1.4561;-.1266,-2.3936,1.1725;-.2307,-2.1874,2.5444;-1.0111,-4.4538,2.8297;-1.1488,-5.6416,1.0346;.2009,-1.5602,.5501;.0413,-1.2079,2.9468;-1.3349,-5.2723,3.4781;-.7445,-3.0576,4.4572;1.6073,-1.7969,-3.7407;1.6456,-1.3988,-2.825;.2981,3.6764,-.8575;-2.0561,-2.9724,-1.7638;-2.9176,-3.1442,-.6768;-3.1276,-2.2862,.2665;-3.7969,-.6937,.5185;-4.4676,-.1149,-1.1285;-2.487,.3694,1.2889;-5.1914,-1.0105,1.7246;-3.4689,-4.3378,-.5074;-4.2909,-4.5679,.6265;-3.6911,.3124,-1.7797;-5.2266,.6701,-.9612;-4.9564,-.9396,-1.6734;-1.5543,.475,.7089;-2.2119,-.0276,2.2794;-2.9175,1.3781,1.4342;-5.6299,-.0478,2.0448;-5.9991,-1.6142,1.2773;-4.8244,-1.5303,2.6252;-5.1971,-3.9415,.583;-3.7423,-4.3629,1.5586;-4.5711,-5.6284,.5741;4.3645,-2.1752,-.139;4.1785,-3.2905,-.9681;3.5109,-4.4204,-.51;3.0281,-4.427,.7929;3.2399,-3.3588,1.6598;3.9078,-2.2365,1.1876;4.5073,-3.2526,-2.01;3.3271,-5.2698,-1.1683;2.2269,-5.5638,1.2524;2.8525,-3.4043,2.6784;4.0489,-1.3814,1.8496;-.4805,3.9762,.2677;-1.8579,3.8018,.2532;-2.4548,3.3352,-.9116;-1.714,3.0493,-2.0554;-.3352,3.2104,-2.0173;.0123,4.3073,1.1877;-2.4661,4.0076,1.1365;-3.9041,3.1196,-.9328;-2.2187,2.6965,-2.9547;.2609,2.9632,-2.8977;2.0715,-5.7047,2.4445;1.7458,-6.2946,.4059;-4.4457,2.9919,-2.009;-4.4821,3.0588,.1363;6.548,.1728,-2.198;5.8644,1.4129,-2.0356;7.6621,.1006,-3.0793;8.0661,1.1989,-3.7972;8.1849,-.8548,-3.1863;8.9195,1.1301,-4.4776;6.2904,2.5243,-2.8154;7.3611,2.4201,-3.6706;5.7493,3.4695,-2.7366;7.6668,3.2866,-4.2638;4.5815,3.9149,-.3371;3.7617,5.0547,-.0897;5.9607,3.9939,.007;6.4997,5.1517,.5146;6.5966,3.1171,-.129;7.5621,5.1862,.7723;4.351,6.2427,.4244;5.6917,6.2967,.7146;3.7102,7.1131,.5963;6.1339,7.2138,1.1135;-2.2352,-3.8846,-2.9608;-2.4696,-4.9206,-2.6731;-3.0595,-3.5182,-3.6016;-1.322,-3.8929,-3.5768;-1.5478,-1.5935,-2.0848;-2.2455,-1.065,-2.7611;-1.3786,-.9684,-1.1925;-.5918,-1.6573,-2.6207;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662447451135</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005478441551 0.000761458118 0.020473658037 0.005338422883</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055650493 -0.003104042 0.000159022 0.000178344 0.000317761 0.000365593 0.000392771 0.000500029 0.000540443 0.000634958 0.000765964 0.000823017 0.000992547 0.001091883 0.001244024 0.001259068 0.001287945 0.001403233 0.001512838 0.001690857 0.001785219 0.002142110 0.002254063 0.002633118 0.003017028 0.003287028 0.003677327 0.003777098 0.004025995 0.004424123 0.004850707 0.005080008 0.005219795 0.005656045 0.005862951 0.005940721 0.006627691 0.006931728 0.007226650 0.007817653 0.007954912 0.008632203 0.009282907 0.009552489 0.010140166 0.010588963 0.010932187 0.011717468 0.012763362 0.013055812 0.013287098 0.014449582 0.014583466 0.015285400 0.015549607 0.015672584 0.016058691 0.016368967 0.017770932 0.018207450 0.018512447 0.018874212 0.020206842 0.020961274 0.021628428 0.022594447 0.022719672 0.023255229 0.024306636 0.025281785 0.025614839 0.026253665 0.026623831 0.026832131 0.027782356 0.028340102 0.030038170 0.030440470 0.032088312 0.032638088 0.033028423 0.035107488 0.038598111 0.038756896 0.040755422 0.041115330 0.045038329 0.045235697 0.045423619 0.046661548 0.048401838 0.049674853 0.051481255 0.051654096 0.051829338 0.052280824 0.052364642 0.052565338 0.053043963 0.054197993 0.054980906 0.055618971 0.056496870 0.056885674 0.057157609 0.057778098 0.058643998 0.059223454 0.059834127 0.060778152 0.061491964 0.062565545 0.063897991 0.064539773 0.064645118 0.066104352 0.066906432 0.067979969 0.068644062 0.069468788 0.071512407 0.071686360 0.072396578 0.072827382 0.076548243 0.079181428 0.080868069 0.081211339 0.082847257 0.084633599 0.087915308 0.088659201 0.089568301 0.091118634 0.092976080 0.094197068 0.095323116 0.095832687 0.096709228 0.097836343 0.099117131 0.099911098 0.101248212 0.101658702 0.102922368 0.103113698 0.104226603 0.107338542 0.108945345 0.110720205 0.111142893 0.111977454 0.112896787 0.114078660 0.114720378 0.116478173 0.117241841 0.118135690 0.120994180 0.124034896 0.124564077 0.127474660 0.127860167 0.129129725 0.133206838 0.133860854 0.135224126 0.136188801 0.137150291 0.139934474 0.143288676 0.145119209 0.146118260 0.149864307 0.151386608 0.153030808 0.156032012 0.160138314 0.166001667 0.170941905 0.174595150 0.177750199 0.180812615 0.183440616 0.186501957 0.187796622 0.189639915 0.197320302 0.201857617 0.203980888 0.205420945 0.206233310 0.207156561 0.209105190 0.212140987 0.213068815 0.214376886 0.216358467 0.218359329 0.221733060 0.225012279 0.231552016 0.232762761 0.234282130 0.235871622 0.242810700 0.245880778 0.249628939 0.255148866 0.255509419 0.257041198 0.261345692 0.271386742 0.279537093 0.291272332 0.297844682 0.298911017 0.300401156 0.305771642 0.307065350 0.307597107 0.317959027 0.321032304 0.325282604 0.327792051 0.330022063 0.347006156 0.351143597 0.355341667 0.357987574 0.359343595 0.363895627 0.383334248 0.404974254 0.406175303 0.429457053 0.429932489 0.431565818 0.445761786 0.459411199 0.464578254 0.466488111 0.477887788 0.484516860 0.497702273 0.498054507 0.512886521 0.515066570 0.543067009 0.565490267 0.567227415 0.583509988 0.591207649 0.605453093 0.640810128 0.644693397 0.665593493 0.673922829 0.682060159 0.691699278 0.696931175 0.699409249 0.704244390 0.715035028 0.724214792 0.735307791 0.737670246 0.744196176 0.750709001 0.771589557 0.775922622 0.804020760 0.817341527 0.820601439 0.821978555 0.832266002 0.841142647 0.844677658 0.846872475 0.851271606 0.858854183 0.867350494 0.869635681 0.873416133 0.875302667 0.883360272 0.890417896 0.892301692 0.896925584 0.902274560 0.916274008 0.920388649 0.924346301 0.931293997 0.937980523 0.949992375 0.958573995 0.964649597 0.970382349 0.981976459 0.995978364 0.998485950 1.011501230 1.018365451 1.038857834 1.048948763 1.055303003 1.067565104 1.076368545 1.086919075 1.100140060 1.110215014 1.111328027 1.116560523 1.122481856 1.123475034 1.134542129 1.144420038 1.161326721 1.169871068 1.173059821 1.176125206 1.200543860 1.216309756 1.223997390 1.247334231 1.295195061 1.296011782 1.314220723 1.324434179 1.326331391 1.327737071 1.330157517 1.334542683 1.341056345 1.346133990 1.362424881 1.378801433 1.380914021 1.381440898 1.395927077 1.494402892 1.557574091 1.671869375 1.901322115</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">109</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.96217532" y3="-0.94166326" z3="-0.70318913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59420161" y3="-1.93319103" z3="-1.66837092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0739373" y3="-0.98312915" z3="-1.51263803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75477152" y3="1.47944936" z3="-1.1281908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32658382" y3="0.32017589" z3="-0.50588503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61591761" y3="2.71036044" z3="-1.08386433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98409192" y3="2.73031113" z3="-0.87729621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36627497" y3="4.97436902" z3="-0.31670692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77770465" y3="3.82024187" z3="-0.77665744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7438" y3="5.84521925" z3="-0.08928032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02498467" y3="1.57140633" z3="-1.54868596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21742595" y3="0.3709099" z3="0.28821142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.75011583" y3="0.34601407" z3="-0.47359504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69739916" y3="0.67095088" z3="0.51994257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67663939" y3="-0.90549488" z3="-1.32031642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13513169" y3="-2.54479304" z3="-1.20026023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32867476" y3="-5.52721062" z3="-6.11509221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00515954" y3="-5.09846689" z3="-5.162339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1644422" y3="-3.97088537" z3="-2.74322302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.00617482" y3="-3.72020085" z3="-4.99358138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60994162" y3="-5.93100405" z3="-4.11227135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20608112" y3="-5.36130928" z3="-2.9116254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.59494999" y3="-3.12434902" z3="-3.79018716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.32094789" y3="-3.04870789" z3="-5.79619553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63135404" y3="-7.018294" z3="-4.22052814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93959311" y3="-6.0010799" z3="-2.06619258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.70206897" y3="-3.4294975" z3="-1.5174065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34599172" y3="-3.90265604" z3="-0.83338676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69591103" y3="-4.89133574" z3="-1.14152482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45659191" y3="-3.63126817" z3="0.61627587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.66759343" y3="-3.21409791" z3="3.37630214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.90437701" y3="-4.65992113" z3="1.45532789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12821757" y3="-2.39011865" z3="1.17058339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.23069407" y3="-2.18432891" z3="2.54261681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-1.00309346" y3="-4.45335247" z3="2.82921009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.14010548" y3="-5.64132927" z3="1.03413007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.19523752" y3="-1.55544935" z3="0.54743793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03870756" y3="-1.20388298" z3="2.944727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.32341065" y3="-5.27293741" z3="3.47795768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.73877463" y3="-3.05610681" z3="4.45638354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.5930129" y3="-1.78891868" z3="-3.74286185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.64151474" y3="-1.39161186" z3="-2.82976576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30169247" y3="3.67747683" z3="-0.86037561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.05862155" y3="-2.97412652" z3="-1.76363702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91838455" y3="-3.14730391" z3="-0.67447059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12992135" y3="-2.28852323" z3="0.26805617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80022017" y3="-0.69580012" z3="0.52160056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.48183815" y3="-0.12103817" z3="-1.11597217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49199767" y3="0.37092831" z3="1.28381127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18981048" y3="-1.01638054" z3="1.73275821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46648835" y3="-4.34139504" z3="-0.50363493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.28564238" y3="-4.57340435" z3="0.63221734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.70541362" y3="0.30254403" z3="-1.7735218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.23477017" y3="0.66973088" z3="-0.9490378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.97687998" y3="-0.94690933" z3="-1.66056299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.55489159" y3="0.47900999" z3="0.70379023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21610136" y3="-0.02950643" z3="2.27764621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.92125509" y3="1.3786105" z3="1.43117661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63013145" y3="-0.05497507" z3="2.05419098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00024439" y3="-1.62079556" z3="1.28626167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.82102522" y3="-1.53918611" z3="2.63514613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19486617" y3="-3.95142121" z3="0.58823536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.73653699" y3="-4.36307028" z3="1.56316065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.56052969" y3="-5.63569168" z3="0.58320107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.35830109" y3="-2.17625416" z3="-0.13769275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17700306" y3="-3.29147454" z3="-0.96807491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51162925" y3="-4.42362149" z3="-0.51253548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02610238" y3="-4.43265157" z3="0.78934059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.23226486" y3="-3.36421958" z3="1.65735774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8976509" y3="-2.23939582" z3="1.18753466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50845603" y3="-3.25198233" z3="-2.00913248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33237603" y3="-5.27329559" z3="-1.17168066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22824033" y3="-5.57256842" z3="1.24661099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.84266022" y3="-3.41166924" z3="2.67500867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.03444306" y3="-1.38425557" z3="1.85043265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47597458" y3="3.97372886" z3="0.26748548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85459112" y3="3.80143364" z3="0.25042079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45384009" y3="3.33877122" z3="-0.91810844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.71253052" y3="3.05276429" z3="-2.06133435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33288302" y3="3.2137892" z3="-2.02256346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01401815" y3="4.30867503" z3="1.18334267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46488471" y3="4.00942327" z3="1.12811767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90122787" y3="3.11817347" z3="-0.93669619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.2202095" y3="2.70224365" z3="-2.96255616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.26319461" y3="2.96781117" z3="-2.90321445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07375261" y3="-5.71673883" z3="2.43835855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74862351" y3="-6.30244176" z3="0.39865019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.44066507" y3="2.98628425" z3="-2.01353369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48070785" y3="3.05889403" z3="0.1317464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54947951" y3="0.17012337" z3="-2.18940041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86633667" y3="1.41074628" z3="-2.02971877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6664413" y3="0.0964647" z3="-3.06707775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.07314796" y3="1.19386316" z3="-3.78482409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18903978" y3="-0.8593857" z3="-3.17128579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.92879678" y3="1.12403476" z3="-4.46227755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.29485538" y3="2.52104457" z3="-2.80988431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.36803569" y3="2.41535668" z3="-3.66182965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75374394" y3="3.46651383" z3="-2.73394161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.67571524" y3="3.28100183" z3="-4.25528742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58380257" y3="3.91613915" z3="-0.33829541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76538474" y3="5.05773264" z3="-0.09522396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96242925" y3="3.99411229" z3="0.00742527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50253838" y3="5.15262843" z3="0.51196811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59684987" y3="3.11584756" z3="-0.1249341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56457106" y3="5.18639576" z3="0.77068204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35571068" y3="6.24638112" z3="0.41619236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69605393" y3="6.2993734" z3="0.70753703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71602277" y3="7.11815196" z3="0.5852288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13910385" y3="7.21715481" z3="1.10400542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.23869202" y3="-3.88696813" z3="-2.95968786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47082401" y3="-4.92331617" z3="-2.67078502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.06451052" y3="-3.52197942" z3="-3.59902783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.32654425" y3="-3.89353168" z3="-3.57724462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.5577057" y3="-1.59237228" z3="-2.08756617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.25609329" y3="-1.06577963" z3="-2.76060518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.38948461" y3="-0.97046231" z3="-1.1946911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.58912078" y3="-1.65761666" z3="-2.61680145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9622,-.9417,-.7032;6.5942,-1.9332,-1.6684;6.0739,-.9831,-1.5126;4.7548,1.4794,-1.1282;4.3266,.3202,-.5059;2.6159,2.7104,-1.0839;3.9841,2.7303,-.8773;2.3663,4.9744,-.3167;1.7777,3.8202,-.7767;1.7438,5.8452,-.0893;2.025,1.5714,-1.5487;3.2174,.3709,.2882;1.7501,.346,-.4736;.6974,.671,.5199;1.6766,-.9055,-1.3203;1.1351,-2.5448,-1.2003;2.3287,-5.5272,-6.1151;2.0052,-5.0985,-5.1623;1.1644,-3.9709,-2.7432;2.0062,-3.7202,-4.9936;1.6099,-5.931,-4.1123;1.2061,-5.3613,-2.9116;1.5949,-3.1243,-3.7902;2.3209,-3.0487,-5.7962;1.6314,-7.0183,-4.2205;.9396,-6.0011,-2.0662;.7021,-3.4295,-1.5174;-.346,-3.9027,-.8334;-.6959,-4.8913,-1.1415;-.4566,-3.6313,.6163;-.6676,-3.2141,3.3763;-.9044,-4.6599,1.4553;-.1282,-2.3901,1.1706;-.2307,-2.1843,2.5426;-1.0031,-4.4534,2.8292;-1.1401,-5.6413,1.0341;.1952,-1.5554,.5474;.0387,-1.2039,2.9447;-1.3234,-5.2729,3.478;-.7388,-3.0561,4.4564;1.593,-1.7889,-3.7429;1.6415,-1.3916,-2.8298;.3017,3.6775,-.8604;-2.0586,-2.9741,-1.7636;-2.9184,-3.1473,-.6745;-3.1299,-2.2885,.2681;-3.8002,-.6958,.5216;-4.4818,-.121,-1.116;-2.492,.3709,1.2838;-5.1898,-1.0164,1.7328;-3.4665,-4.3414,-.5036;-4.2856,-4.5734,.6322;-3.7054,.3025,-1.7735;-5.2348,.6697,-.949;-4.9769,-.9469,-1.6606;-1.5549,.479,.7038;-2.2161,-.0295,2.2776;-2.9213,1.3786,1.4312;-5.6301,-.055,2.0542;-6.0002,-1.6208,1.2863;-4.821,-1.5392,2.6351;-5.1949,-3.9514,.5882;-3.7365,-4.3631,1.5632;-4.5605,-5.6357,.5832;4.3583,-2.1763,-.1377;4.177,-3.2915,-.9681;3.5116,-4.4236,-.5125;3.0261,-4.4327,.7893;3.2323,-3.3642,1.6574;3.8977,-2.2394,1.1875;4.5085,-3.252,-2.0091;3.3324,-5.2733,-1.1717;2.2282,-5.5726,1.2466;2.8427,-3.4117,2.675;4.0344,-1.3843,1.8504;-.476,3.9737,.2675;-1.8546,3.8014,.2504;-2.4538,3.3388,-.9181;-1.7125,3.0528,-2.0613;-.3329,3.2138,-2.0226;.014,4.3087,1.1833;-2.4649,4.0094,1.1281;-3.9012,3.1182,-.9367;-2.2202,2.7022,-2.9626;.2632,2.9678,-2.9032;2.0738,-5.7167,2.4384;1.7486,-6.3024,.3987;-4.4407,2.9863,-2.0135;-4.4807,3.0589,.1317;6.5495,.1701,-2.1894;5.8663,1.4107,-2.0297;7.6664,.0965,-3.0671;8.0731,1.1939,-3.7848;8.189,-.8594,-3.1713;8.9288,1.124,-4.4623;6.2949,2.521,-2.8099;7.368,2.4154,-3.6618;5.7537,3.4665,-2.7339;7.6757,3.281,-4.2553;4.5838,3.9161,-.3383;3.7654,5.0577,-.0952;5.9624,3.9941,.0074;6.5025,5.1526,.512;6.5968,3.1158,-.1249;7.5646,5.1864,.7707;4.3557,6.2464,.4162;5.6961,6.2994,.7075;3.716,7.1182,.5852;6.1391,7.2172,1.104;-2.2387,-3.887,-2.9597;-2.4708,-4.9233,-2.6708;-3.0645,-3.522,-3.599;-1.3265,-3.8935,-3.5772;-1.5577,-1.5924,-2.0876;-2.2561,-1.0658,-2.7606;-1.3895,-.9705,-1.1947;-.5891,-1.6576,-2.6168;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662477866612</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004901181578 0.000770001756 0.017513098814 0.005337468188</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055644290 -0.003185592 0.000146230 0.000186851 0.000319357 0.000371385 0.000390614 0.000496260 0.000540479 0.000634951 0.000765510 0.000828006 0.000997182 0.001098852 0.001245057 0.001261496 0.001288999 0.001407407 0.001513555 0.001690971 0.001787127 0.002142038 0.002267539 0.002647797 0.003016914 0.003287260 0.003677239 0.003780279 0.004025933 0.004433039 0.004853073 0.005094054 0.005275308 0.005697401 0.005873274 0.005953213 0.006632436 0.006943144 0.007228676 0.007820642 0.007967860 0.008649239 0.009302290 0.009552260 0.010139320 0.010601660 0.010941772 0.011717905 0.012787531 0.013055790 0.013295323 0.014451835 0.014582767 0.015287953 0.015551807 0.015682496 0.016064305 0.016369178 0.017775936 0.018208379 0.018669618 0.018899990 0.020219833 0.020981887 0.021678389 0.022608333 0.022727982 0.023255330 0.024321686 0.025375903 0.025626044 0.026259860 0.026675000 0.026831815 0.027784177 0.028355368 0.030046762 0.030443874 0.032117395 0.032638561 0.033138955 0.035107585 0.038602162 0.038786168 0.040864091 0.041129509 0.045082551 0.045241885 0.045429475 0.046756696 0.048446905 0.049675124 0.051487874 0.051667645 0.051830632 0.052281002 0.052366066 0.052565424 0.053095504 0.054197985 0.055001727 0.055709496 0.056498520 0.056888970 0.057160928 0.057789178 0.058644611 0.059224468 0.059884328 0.060778540 0.061494332 0.062582382 0.063915936 0.064546163 0.064679391 0.066117178 0.066942060 0.067981965 0.068653735 0.069670901 0.071574061 0.072087914 0.072405748 0.072828355 0.076551035 0.079183259 0.080883649 0.081236920 0.082848500 0.084646211 0.087923187 0.088662150 0.089568257 0.091153847 0.092978023 0.094197485 0.095323363 0.095833236 0.096711472 0.097836321 0.099176678 0.099982790 0.101254285 0.101724077 0.102924840 0.103120024 0.104259058 0.107347388 0.108945283 0.110802583 0.111170425 0.112026259 0.112981820 0.114451189 0.114767561 0.116485065 0.117268928 0.118134861 0.121008567 0.124061393 0.124631943 0.127513790 0.127883848 0.129249993 0.133216283 0.135220126 0.135258148 0.136522268 0.137149983 0.139975933 0.143321931 0.145222117 0.146118929 0.150070116 0.151385418 0.153031946 0.156272753 0.160140670 0.166001754 0.170961339 0.174600619 0.177818144 0.180827089 0.183463537 0.186566674 0.187861933 0.189647125 0.197518963 0.201861656 0.204052786 0.205421305 0.206263022 0.207157862 0.209107614 0.212147235 0.213077190 0.214504820 0.216401221 0.218369939 0.221755869 0.225020306 0.231558640 0.232764835 0.234291654 0.235919442 0.242852466 0.245904077 0.249631841 0.255160010 0.255527320 0.257041314 0.261351876 0.271386782 0.279641707 0.291272553 0.297853530 0.298927300 0.300401575 0.305775891 0.307127837 0.307597163 0.317968078 0.321032630 0.325288766 0.327800349 0.330075164 0.347006350 0.351146322 0.355341624 0.358031908 0.359344396 0.363895587 0.383352751 0.405146695 0.406256276 0.429455564 0.429934402 0.431569591 0.445763563 0.459408084 0.464583006 0.466497862 0.477887885 0.484583658 0.497761213 0.498056127 0.513110297 0.515160033 0.543068093 0.565490289 0.567232455 0.583535002 0.591209302 0.605459888 0.640826487 0.644693598 0.665610861 0.673922852 0.682198443 0.691713520 0.697733273 0.699479412 0.704244397 0.715046974 0.724229423 0.735338578 0.737680308 0.744222064 0.750709014 0.771589948 0.775923271 0.804223008 0.817342251 0.820726878 0.822084735 0.832339932 0.841187031 0.844916613 0.846886969 0.851587739 0.858914522 0.867350745 0.871514701 0.873528162 0.875316426 0.883367409 0.890454353 0.893350717 0.896924934 0.902275120 0.916304728 0.921117344 0.924346354 0.931356805 0.938389317 0.950024488 0.958636643 0.966150223 0.970588621 0.981977270 0.996226441 0.998503497 1.011606961 1.018406396 1.038872437 1.048956710 1.055306710 1.067829130 1.076372477 1.086931840 1.100203080 1.110217985 1.111357279 1.116600104 1.122483967 1.123478871 1.134542775 1.144421096 1.161326791 1.169879408 1.173077508 1.176163894 1.200544260 1.216576271 1.224420812 1.247335593 1.295222209 1.296018158 1.314229073 1.324448448 1.326334043 1.327829085 1.330157541 1.334543771 1.341056394 1.346134684 1.362437133 1.378802285 1.380916355 1.381444196 1.396876227 1.494456395 1.557607238 1.671869522 1.901336145</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">110</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95731819" y3="-0.94294023" z3="-0.70008186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59150793" y3="-1.93604513" z3="-1.65983039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07160354" y3="-0.98549339" z3="-1.50597991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75368553" y3="1.47845453" z3="-1.12602952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.32268155" y3="0.31964224" z3="-0.50449226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61595442" y3="2.71314324" z3="-1.085309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98421644" y3="2.73070446" z3="-0.87692808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36905883" y3="4.97849082" z3="-0.32104398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7788393" y3="3.82478068" z3="-0.78020005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74761559" y3="5.85075956" z3="-0.09514597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02386044" y3="1.57513895" z3="-1.55089873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.21211708" y3="0.37169803" z3="0.28759886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74563456" y3="0.35008116" z3="-0.47628389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.69218091" y3="0.67658262" z3="0.51636722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67116097" y3="-0.90076242" z3="-1.32371984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.13249221" y3="-2.53958685" z3="-1.20328554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.33088921" y3="-5.51958539" z3="-6.11861775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00626582" y3="-5.09148049" z3="-5.1659925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16314242" y3="-3.96490028" z3="-2.74699057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="2.00317844" y3="-3.71323305" z3="-4.99812498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.61421847" y3="-5.92463524" z3="-4.11515779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20883199" y3="-5.35535237" z3="-2.91471003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.59157996" y3="-3.11781094" z3="-3.79473535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.31532187" y3="-3.04088612" z3="-5.80105212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63927586" y3="-7.01191935" z3="-4.22277442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94475905" y3="-5.99549191" z3="-2.06873012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69947297" y3="-3.42367008" z3="-1.52131723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34632277" y3="-3.90032526" z3="-0.83547474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69430602" y3="-4.88960095" z3="-1.14311794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45497372" y3="-3.62870988" z3="0.61456251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.66126019" y3="-3.21300934" z3="3.37510269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.89681658" y3="-4.65922647" z3="1.45438056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13050711" y3="-2.38617772" z3="1.16828915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.23052539" y3="-2.18124579" z3="2.54061303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.99303983" y3="-4.45348109" z3="2.82857003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.12921934" y3="-5.64167478" z3="1.03356195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.18904411" y3="-1.55047715" z3="0.5447441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03639953" y3="-1.20013517" z3="2.94239621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.30813451" y3="-5.27473394" z3="3.47794818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.73032409" y3="-3.0558132" z3="4.45537805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.58878587" y3="-1.78247" z3="-3.74992623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.62759311" y3="-1.38420485" z3="-2.8326012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30247705" y3="3.68498106" z3="-0.86649342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06081106" y3="-2.97521267" z3="-1.76184793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91970973" y3="-3.14809896" z3="-0.67193391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13162468" y3="-2.28871142" z3="0.26963008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80591875" y3="-0.69946458" z3="0.52700792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.49122372" y3="-0.12438006" z3="-1.11520288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.49753987" y3="0.37145784" z3="1.28557536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18941154" y3="-1.02394651" z3="1.742281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.46450762" y3="-4.34370501" z3="-0.49861766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.27908112" y3="-4.57767528" z3="0.63990331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.71826462" y3="0.29585337" z3="-1.7772362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.24481339" y3="0.66516185" z3="-0.940977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.98907008" y3="-0.95167289" z3="-1.65314698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.5656101" y3="0.47913808" z3="0.70136707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21493687" y3="-0.01913859" z3="2.27598069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.93247688" y3="1.37781182" z3="1.43002335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63091859" y3="-0.06383694" z3="2.06560427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99718182" y3="-1.63220336" z3="1.30075376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.81267693" y3="-1.54144429" z3="2.63968466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.19057266" y3="-3.95931226" z3="0.59907313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.72741779" y3="-4.36571972" z3="1.56812514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.55059021" y3="-5.64027421" z3="0.5918828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.35177756" y3="-2.1777378" z3="-0.13672711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17539951" y3="-3.29324933" z3="-0.96784825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51204057" y3="-4.42728785" z3="-0.51432035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02352336" y3="-4.4380165" z3="0.78641847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.22409534" y3="-3.36902836" z3="1.6550261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.88715846" y3="-2.24208125" z3="1.18706439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.5098855" y3="-3.25291215" z3="-2.00788855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33774491" y3="-5.27763922" z3="-1.17386372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.22881831" y3="-5.58075392" z3="1.24194953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.83228608" y3="-3.41796966" z3="2.67177708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.01963246" y3="-1.3866629" z3="1.85045934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47647789" y3="3.98120321" z3="0.2592592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85419479" y3="3.80552443" z3="0.24328682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4495824" y3="3.33813801" z3="-0.92058673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70960629" y3="3.05885914" z3="-2.06837475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.33062575" y3="3.22213248" z3="-2.02892242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01467199" y3="4.31195779" z3="1.17875027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46289156" y3="4.00844249" z3="1.12678655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89603523" y3="3.11342715" z3="-0.93904879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21383356" y3="2.70576231" z3="-2.96741409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.26565298" y3="2.97752168" z3="-2.90988032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.07727673" y3="-5.72887919" z3="2.43363071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74865692" y3="-6.30890288" z3="0.39278838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43557893" y3="2.97998801" z3="-2.01741644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47574405" y3="3.05455603" z3="0.12938165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55029017" y3="0.16711557" z3="-2.1815347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8675982" y3="1.40829561" z3="-2.02451859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67003916" y3="0.09211492" z3="-3.05548488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.07983252" y3="1.18880172" z3="-3.77247966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19225808" y3="-0.86420355" z3="-3.15748117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.93762913" y3="1.1180216" z3="-4.44709216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.29926183" y3="2.5177152" z3="-2.80407553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.37502052" y3="2.41077725" z3="-3.65248577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.75856936" y3="3.46359687" z3="-2.7304969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.68496944" y3="3.27581955" z3="-4.245574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58527556" y3="3.91637419" z3="-0.33855388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76822835" y3="5.05988529" z3="-0.0985603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96379268" y3="3.99286828" z3="0.00866271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50521283" y3="5.15183198" z3="0.51088013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59718126" y3="3.11325921" z3="-0.12091941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56716165" y3="5.18449988" z3="0.77051592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36009941" y3="6.24891425" z3="0.4102224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70041368" y3="6.30054224" z3="0.70246239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72184135" y3="7.12223109" z3="0.57565575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14467136" y3="7.21875643" z3="1.09664209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24140216" y3="-3.88960782" z3="-2.95730301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47095241" y3="-4.92623593" z3="-2.66646506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.06928392" y3="-3.52762321" z3="-3.5965562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.33017123" y3="-3.89584874" z3="-3.57632104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.56135209" y3="-1.59385001" z3="-2.0865053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.26442703" y3="-1.07068068" z3="-2.76143278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.39388642" y3="-0.96628136" z3="-1.19526257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.60663388" y3="-1.65281976" z3="-2.6246618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9573,-.9429,-.7001;6.5915,-1.936,-1.6598;6.0716,-.9855,-1.506;4.7537,1.4785,-1.126;4.3227,.3196,-.5045;2.616,2.7131,-1.0853;3.9842,2.7307,-.8769;2.3691,4.9785,-.321;1.7788,3.8248,-.7802;1.7476,5.8508,-.0951;2.0239,1.5751,-1.5509;3.2121,.3717,.2876;1.7456,.3501,-.4763;.6922,.6766,.5164;1.6712,-.9008,-1.3237;1.1325,-2.5396,-1.2033;2.3309,-5.5196,-6.1186;2.0063,-5.0915,-5.166;1.1631,-3.9649,-2.747;2.0032,-3.7132,-4.9981;1.6142,-5.9246,-4.1152;1.2088,-5.3554,-2.9147;1.5916,-3.1178,-3.7947;2.3153,-3.0409,-5.8011;1.6393,-7.0119,-4.2228;.9448,-5.9955,-2.0687;.6995,-3.4237,-1.5213;-.3463,-3.9003,-.8355;-.6943,-4.8896,-1.1431;-.455,-3.6287,.6146;-.6613,-3.213,3.3751;-.8968,-4.6592,1.4544;-.1305,-2.3862,1.1683;-.2305,-2.1812,2.5406;-.993,-4.4535,2.8286;-1.1292,-5.6417,1.0336;.189,-1.5505,.5447;.0364,-1.2001,2.9424;-1.3081,-5.2747,3.4779;-.7303,-3.0558,4.4554;1.5888,-1.7825,-3.7499;1.6276,-1.3842,-2.8326;.3025,3.685,-.8665;-2.0608,-2.9752,-1.7618;-2.9197,-3.1481,-.6719;-3.1316,-2.2887,.2696;-3.8059,-.6995,.527;-4.4912,-.1244,-1.1152;-2.4975,.3715,1.2856;-5.1894,-1.0239,1.7423;-3.4645,-4.3437,-.4986;-4.2791,-4.5777,.6399;-3.7183,.2959,-1.7772;-5.2448,.6652,-.941;-4.9891,-.9517,-1.6531;-1.5656,.4791,.7014;-2.2149,-.0191,2.276;-2.9325,1.3778,1.43;-5.6309,-.0638,2.0656;-5.9972,-1.6322,1.3008;-4.8127,-1.5414,2.6397;-5.1906,-3.9593,.5991;-3.7274,-4.3657,1.5681;-4.5506,-5.6403,.5919;4.3518,-2.1777,-.1367;4.1754,-3.2932,-.9678;3.512,-4.4273,-.5143;3.0235,-4.438,.7864;3.2241,-3.369,1.655;3.8872,-2.2421,1.1871;4.5099,-3.2529,-2.0079;3.3377,-5.2776,-1.1739;2.2288,-5.5808,1.2419;2.8323,-3.418,2.6718;4.0196,-1.3867,1.8505;-.4765,3.9812,.2593;-1.8542,3.8055,.2433;-2.4496,3.3381,-.9206;-1.7096,3.0589,-2.0684;-.3306,3.2221,-2.0289;.0147,4.312,1.1788;-2.4629,4.0084,1.1268;-3.896,3.1134,-.939;-2.2138,2.7058,-2.9674;.2657,2.9775,-2.9099;2.0773,-5.7289,2.4336;1.7487,-6.3089,.3928;-4.4356,2.98,-2.0174;-4.4757,3.0546,.1294;6.5503,.1671,-2.1815;5.8676,1.4083,-2.0245;7.67,.0921,-3.0555;8.0798,1.1888,-3.7725;8.1923,-.8642,-3.1575;8.9376,1.118,-4.4471;6.2993,2.5177,-2.8041;7.375,2.4108,-3.6525;5.7586,3.4636,-2.7305;7.685,3.2758,-4.2456;4.5853,3.9164,-.3386;3.7682,5.0599,-.0986;5.9638,3.9929,.0087;6.5052,5.1518,.5109;6.5972,3.1133,-.1209;7.5672,5.1845,.7705;4.3601,6.2489,.4102;5.7004,6.3005,.7025;3.7218,7.1222,.5757;6.1447,7.2188,1.0966;-2.2414,-3.8896,-2.9573;-2.471,-4.9262,-2.6665;-3.0693,-3.5276,-3.5966;-1.3302,-3.8958,-3.5763;-1.5614,-1.5939,-2.0865;-2.2644,-1.0707,-2.7614;-1.3939,-.9663,-1.1953;-.6066,-1.6528,-2.6247;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662506649247</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004481767823 0.000791968875 0.020001779234 0.005338025448</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055664648 -0.003110171 0.000140330 0.000199286 0.000319270 0.000370949 0.000391351 0.000500815 0.000539876 0.000635017 0.000765375 0.000828312 0.000998170 0.001100129 0.001246109 0.001261568 0.001291188 0.001410046 0.001516230 0.001693881 0.001787601 0.002142122 0.002268801 0.002666084 0.003017752 0.003308918 0.003677442 0.003780392 0.004027294 0.004433217 0.004852758 0.005097633 0.005306864 0.005739556 0.005880669 0.005995790 0.006632287 0.006964541 0.007230852 0.007824698 0.007976333 0.008663022 0.009318696 0.009553660 0.010141437 0.010633782 0.010943422 0.011718507 0.012791680 0.013057583 0.013316646 0.014460562 0.014582868 0.015287734 0.015552989 0.015691521 0.016065018 0.016370416 0.017783145 0.018211768 0.018736831 0.019031435 0.020222335 0.021064339 0.021685581 0.022612030 0.022739871 0.023255435 0.024321606 0.025475748 0.025627796 0.026263077 0.026705669 0.026839504 0.027793468 0.028383026 0.030051333 0.030446714 0.032119082 0.032644160 0.033296121 0.035109136 0.038610025 0.038810644 0.040966299 0.041175449 0.045143872 0.045242513 0.045434182 0.046947354 0.048542525 0.049675701 0.051490623 0.051671296 0.051831286 0.052280990 0.052366108 0.052565860 0.053101884 0.054201174 0.055024534 0.055804023 0.056500105 0.056892044 0.057167507 0.057805917 0.058644657 0.059224720 0.059953099 0.060784716 0.061499254 0.062584210 0.063918588 0.064546037 0.064695644 0.066122640 0.066951123 0.067985865 0.068658689 0.069799364 0.071594255 0.072319274 0.072464046 0.072828540 0.076551167 0.079264494 0.080903594 0.081379582 0.082848827 0.084661375 0.087927834 0.088662090 0.089568404 0.091187660 0.092984046 0.094201636 0.095324134 0.095835041 0.096718531 0.097841935 0.099185920 0.100025502 0.101260320 0.101823186 0.102924961 0.103128950 0.104284875 0.107353413 0.108946922 0.110848663 0.111181860 0.112066541 0.113047759 0.114618434 0.114967172 0.116500155 0.117310203 0.118146860 0.121033788 0.124064681 0.124704934 0.127556682 0.127908558 0.129402780 0.133217699 0.135217482 0.135669602 0.137149657 0.137395285 0.139976249 0.143320707 0.145229268 0.146120155 0.150159684 0.151386287 0.153033104 0.156362082 0.160144033 0.166002244 0.170984664 0.174619232 0.177935695 0.180844614 0.183474471 0.186642758 0.187977141 0.189670529 0.197817918 0.201867624 0.204233868 0.205421732 0.206308014 0.207160004 0.209109192 0.212150958 0.213083489 0.214634924 0.216489460 0.218449984 0.221769530 0.225029431 0.231572474 0.232765441 0.234312186 0.236032432 0.242911880 0.245946208 0.249633350 0.255177420 0.255555036 0.257041728 0.261396454 0.271387233 0.279878646 0.291275938 0.297887318 0.298937871 0.300402375 0.305794022 0.307258245 0.307597317 0.317969598 0.321034577 0.325294813 0.327801954 0.330217860 0.347016341 0.351146970 0.355344913 0.358039925 0.359347055 0.363898433 0.383352274 0.405576394 0.406380785 0.429494559 0.429940343 0.431611105 0.445771005 0.459450099 0.464607796 0.466571874 0.477887888 0.484648639 0.497775364 0.498057028 0.513180530 0.515192243 0.543068623 0.565490324 0.567234685 0.583568552 0.591209466 0.605465623 0.640843318 0.644693846 0.665623606 0.673923122 0.682443708 0.691716770 0.698096808 0.699484389 0.704244399 0.715049586 0.724257142 0.735342493 0.737689904 0.744261709 0.750709474 0.771590680 0.775923784 0.804397990 0.817355364 0.820874845 0.822348829 0.832396820 0.841308905 0.845101295 0.846890328 0.851936303 0.858978013 0.867350818 0.872836883 0.873908018 0.875345322 0.883492133 0.890457301 0.894383420 0.896946521 0.902292065 0.916315836 0.921853773 0.924346362 0.931426761 0.938734694 0.950064779 0.958640529 0.966953416 0.970670856 0.981982153 0.996544508 0.998516185 1.011717533 1.018413932 1.038875518 1.048973590 1.055309333 1.067916552 1.076376096 1.086933206 1.100229510 1.110218664 1.111359942 1.116670276 1.122485257 1.123481086 1.134543615 1.144434984 1.161326913 1.169888112 1.173129987 1.176208437 1.200544308 1.216857519 1.224909088 1.247335904 1.295260717 1.296027128 1.314243443 1.324454563 1.326336770 1.327929189 1.330159150 1.334544500 1.341056675 1.346135130 1.362441297 1.378802595 1.380916665 1.381450812 1.398076628 1.495343973 1.557644089 1.671870450 1.901695508</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">111</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.95171752" y3="-0.94399708" z3="-0.69770414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58821714" y3="-1.93837795" z3="-1.65220222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0684319" y3="-0.98747047" z3="-1.50022069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75195371" y3="1.47780813" z3="-1.12363825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.31793081" y3="0.31929043" z3="-0.50352824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61647503" y3="2.71637157" z3="-1.08744899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98405633" y3="2.73139544" z3="-0.87606195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37235308" y3="4.98314333" z3="-0.32604044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78137287" y3="3.83008376" z3="-0.78539222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75201355" y3="5.85654263" z3="-0.10188133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0230602" y3="1.57938367" z3="-1.55378504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.20568242" y3="0.37249771" z3="0.28607366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.74111938" y3="0.35342957" z3="-0.48119552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.685764" y3="0.67944489" z3="0.50933642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6676876" y3="-0.89638582" z3="-1.33039671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12981383" y3="-2.53358385" z3="-1.20806891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.33253157" y3="-5.5125937" z3="-6.12187873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00685471" y3="-5.08472572" z3="-5.16944745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16151465" y3="-3.9597521" z3="-2.7508373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.99836687" y3="-3.7061598" z3="-5.00265321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.6183326" y3="-5.9185481" z3="-4.11790147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21197757" y3="-5.35006822" z3="-2.91746809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58430199" y3="-3.11154056" z3="-3.79960391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.30767284" y3="-3.03370211" z3="-5.80661051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6470486" y3="-7.00583173" z3="-4.22478111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95089728" y3="-5.990443" z3="-2.07077315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69876572" y3="-3.41983192" z3="-1.52440283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34441418" y3="-3.89812488" z3="-0.83728424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69203006" y3="-4.887685" z3="-1.14465064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.45211774" y3="-3.6265056" z3="0.61282003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.65256711" y3="-3.21202602" z3="3.37399484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.88678166" y3="-4.6591955" z3="1.45377875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13245364" y3="-2.38230669" z3="1.16562835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22970707" y3="-2.17789126" z3="2.53824042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.97974663" y3="-4.45411679" z3="2.82837247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.11608498" y3="-5.64255614" z3="1.03357606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.18084833" y3="-1.54470438" z3="0.54109302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03330774" y3="-1.19527813" z3="2.93937849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.28873564" y3="-5.27705809" z3="3.47848745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.71909478" y3="-3.0552698" z3="4.45452663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.57153252" y3="-1.77595685" z3="-3.75335795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.62586623" y3="-1.37893533" z3="-2.84146033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30511479" y3="3.69054209" z3="-0.87175367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06555102" y3="-2.97570357" z3="-1.76182917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91956465" y3="-3.15057304" z3="-0.66914955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13037257" y3="-2.29090227" z3="0.27254382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80804586" y3="-0.70151962" z3="0.52755933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.50206478" y3="-0.13007939" z3="-1.10673737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50082381" y3="0.37411757" z3="1.28285065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18927989" y3="-1.02872145" z3="1.74752583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4611265" y3="-4.34714541" z3="-0.49261632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.27095592" y3="-4.58128861" z3="0.64956107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.73199551" y3="0.28669341" z3="-1.77480632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.24805912" y3="0.66581223" z3="-0.93348277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.00907186" y3="-0.95389319" z3="-1.63964665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.57009085" y3="0.48410274" z3="0.69786791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21927712" y3="-0.02158727" z3="2.27746463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.93556914" y3="1.38058656" z3="1.4271019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63331329" y3="-0.0698733" z3="2.07173375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99830792" y3="-1.63846647" z3="1.30658888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.81194457" y3="-1.549147" z3="2.64814229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.1850001" y3="-3.96605862" z3="0.60996655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.71698205" y3="-4.36407145" z3="1.57618227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.53832286" y3="-5.64583419" z3="0.60577824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.3448459" y3="-2.17900237" z3="-0.13613435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17346524" y3="-3.29524226" z3="-0.96742759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51217225" y3="-4.43103384" z3="-0.51532987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02062595" y3="-4.44296902" z3="0.78424797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.21544814" y3="-3.37292597" z3="1.65286855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.87622647" y3="-2.24404242" z3="1.18621002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51106021" y3="-3.25454604" z3="-2.00643537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34293606" y3="-5.28244767" z3="-1.17477205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2296425" y3="-5.58868424" z3="1.23858145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.82124285" y3="-3.42270327" z3="2.6686745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="4.00443036" y3="-1.38806913" z3="1.84970093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4734119" y3="3.98225025" z3="0.25658388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85035829" y3="3.80283415" z3="0.24134098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44776873" y3="3.34023396" z3="-0.92822868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70560906" y3="3.0603333" z3="-2.07170028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32760704" y3="3.22811188" z3="-2.03412289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01576488" y3="4.31528198" z3="1.17410106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46052779" y3="4.00535498" z3="1.12147775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89519159" y3="3.11466733" z3="-0.94762922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21130673" y3="2.71028032" z3="-2.97393065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.26921193" y3="2.98722834" z3="-2.915834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08151007" y3="-5.74046737" z3="2.43021863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74891165" y3="-6.31557041" z3="0.38852774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43415507" y3="2.97492316" z3="-2.02254158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47433965" y3="3.05813678" z3="0.12110752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55018257" y3="0.16459572" z3="-2.17437801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8680994" y3="1.40637106" z3="-2.01953284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67270736" y3="0.08836721" z3="-3.04464634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.08586596" y3="1.18453521" z3="-3.76046138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1943921" y3="-0.86843908" z3="-3.14461154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.94590547" y3="1.11292125" z3="-4.43206428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.30314507" y3="2.51512221" z3="-2.79824351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.38157366" y3="2.40704661" z3="-3.64314429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.76309522" y3="3.46150077" z3="-2.72682577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.69419695" y3="3.27170572" z3="-4.23535661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58617949" y3="3.91662502" z3="-0.33793773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7710612" y3="5.06213773" z3="-0.10124107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96419842" y3="3.99114623" z3="0.01137714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50723087" y3="5.15016263" z3="0.51176308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59610749" y3="3.11010994" z3="-0.11550477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56891665" y3="5.18135676" z3="0.7726178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3643448" y3="6.25104556" z3="0.40604823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70434521" y3="6.30083581" z3="0.69977134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72727333" y3="7.12595087" z3="0.56917217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14982753" y3="7.21917084" z3="1.09225993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.2451567" y3="-3.89250023" z3="-2.95531575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47324158" y3="-4.92878223" z3="-2.66367789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.07367432" y3="-3.53143653" z3="-3.59322248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.33440347" y3="-3.89778844" z3="-3.57508575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.57136412" y3="-1.59265254" z3="-2.0905962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.27413135" y3="-1.07153574" z3="-2.76428726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.40421766" y3="-0.96700352" z3="-1.20014663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.60614539" y3="-1.65359303" z3="-2.62379966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9517,-.944,-.6977;6.5882,-1.9384,-1.6522;6.0684,-.9875,-1.5002;4.752,1.4778,-1.1236;4.3179,.3193,-.5035;2.6165,2.7164,-1.0874;3.9841,2.7314,-.8761;2.3724,4.9831,-.326;1.7814,3.8301,-.7854;1.752,5.8565,-.1019;2.0231,1.5794,-1.5538;3.2057,.3725,.2861;1.7411,.3534,-.4812;.6858,.6794,.5093;1.6677,-.8964,-1.3304;1.1298,-2.5336,-1.2081;2.3325,-5.5126,-6.1219;2.0069,-5.0847,-5.1694;1.1615,-3.9598,-2.7508;1.9984,-3.7062,-5.0027;1.6183,-5.9185,-4.1179;1.212,-5.3501,-2.9175;1.5843,-3.1115,-3.7996;2.3077,-3.0337,-5.8066;1.647,-7.0058,-4.2248;.9509,-5.9904,-2.0708;.6988,-3.4198,-1.5244;-.3444,-3.8981,-.8373;-.692,-4.8877,-1.1447;-.4521,-3.6265,.6128;-.6526,-3.212,3.374;-.8868,-4.6592,1.4538;-.1325,-2.3823,1.1656;-.2297,-2.1779,2.5382;-.9797,-4.4541,2.8284;-1.1161,-5.6426,1.0336;.1808,-1.5447,.5411;.0333,-1.1953,2.9394;-1.2887,-5.2771,3.4785;-.7191,-3.0553,4.4545;1.5715,-1.776,-3.7534;1.6259,-1.3789,-2.8415;.3051,3.6905,-.8718;-2.0656,-2.9757,-1.7618;-2.9196,-3.1506,-.6691;-3.1304,-2.2909,.2725;-3.808,-.7015,.5276;-4.5021,-.1301,-1.1067;-2.5008,.3741,1.2829;-5.1893,-1.0287,1.7475;-3.4611,-4.3471,-.4926;-4.271,-4.5813,.6496;-3.732,.2867,-1.7748;-5.2481,.6658,-.9335;-5.0091,-.9539,-1.6396;-1.5701,.4841,.6979;-2.2193,-.0216,2.2775;-2.9356,1.3806,1.4271;-5.6333,-.0699,2.0717;-5.9983,-1.6385,1.3066;-4.8119,-1.5491,2.6481;-5.185,-3.9661,.61;-3.717,-4.3641,1.5762;-4.5383,-5.6458,.6058;4.3448,-2.179,-.1361;4.1735,-3.2952,-.9674;3.5122,-4.431,-.5153;3.0206,-4.443,.7842;3.2154,-3.3729,1.6529;3.8762,-2.244,1.1862;4.5111,-3.2545,-2.0064;3.3429,-5.2824,-1.1748;2.2296,-5.5887,1.2386;2.8212,-3.4227,2.6687;4.0044,-1.3881,1.8497;-.4734,3.9823,.2566;-1.8504,3.8028,.2413;-2.4478,3.3402,-.9282;-1.7056,3.0603,-2.0717;-.3276,3.2281,-2.0341;.0158,4.3153,1.1741;-2.4605,4.0054,1.1215;-3.8952,3.1147,-.9476;-2.2113,2.7103,-2.9739;.2692,2.9872,-2.9158;2.0815,-5.7405,2.4302;1.7489,-6.3156,.3885;-4.4342,2.9749,-2.0225;-4.4743,3.0581,.1211;6.5502,.1646,-2.1744;5.8681,1.4064,-2.0195;7.6727,.0884,-3.0446;8.0859,1.1845,-3.7605;8.1944,-.8684,-3.1446;8.9459,1.1129,-4.4321;6.3031,2.5151,-2.7982;7.3816,2.407,-3.6431;5.7631,3.4615,-2.7268;7.6942,3.2717,-4.2354;4.5862,3.9166,-.3379;3.7711,5.0621,-.1012;5.9642,3.9911,.0114;6.5072,5.1502,.5118;6.5961,3.1101,-.1155;7.5689,5.1814,.7726;4.3643,6.251,.406;5.7043,6.3008,.6998;3.7273,7.126,.5692;6.1498,7.2192,1.0923;-2.2452,-3.8925,-2.9553;-2.4732,-4.9288,-2.6637;-3.0737,-3.5314,-3.5932;-1.3344,-3.8978,-3.5751;-1.5714,-1.5927,-2.0906;-2.2741,-1.0715,-2.7643;-1.4042,-.967,-1.2001;-.6061,-1.6536,-2.6238;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662541480990</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003920867864 0.000736439461 0.021057251554 0.005337159410</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055723731 -0.002534563 0.000136247 0.000204052 0.000319921 0.000370823 0.000392468 0.000499894 0.000541623 0.000635206 0.000766274 0.000830755 0.001007488 0.001100666 0.001246418 0.001261658 0.001291125 0.001409818 0.001516064 0.001695244 0.001787193 0.002142097 0.002270257 0.002685357 0.003017730 0.003311005 0.003678754 0.003781636 0.004026589 0.004438532 0.004853197 0.005097859 0.005317429 0.005749346 0.005880534 0.006021926 0.006641535 0.006970935 0.007231164 0.007829158 0.007976043 0.008665158 0.009322297 0.009553364 0.010141093 0.010636585 0.010944554 0.011721177 0.012792610 0.013058272 0.013326964 0.014466041 0.014582891 0.015289513 0.015556918 0.015694036 0.016065243 0.016372631 0.017785929 0.018216369 0.018733133 0.019143518 0.020222571 0.021156441 0.021685108 0.022611582 0.022747491 0.023255880 0.024326646 0.025499093 0.025671397 0.026289354 0.026709611 0.026865928 0.027810452 0.028417589 0.030053134 0.030447691 0.032120792 0.032646592 0.033441596 0.035110913 0.038619235 0.038824957 0.041002922 0.041267781 0.045191449 0.045244456 0.045450840 0.047160111 0.048652199 0.049676731 0.051491446 0.051671291 0.051831547 0.052281124 0.052366331 0.052568398 0.053104773 0.054217653 0.055046711 0.055850285 0.056501551 0.056892838 0.057173112 0.057820114 0.058645857 0.059225541 0.060006956 0.060801542 0.061511135 0.062584150 0.063918688 0.064546072 0.064701961 0.066122343 0.066961102 0.067988317 0.068661841 0.069829591 0.071606925 0.072354551 0.072519089 0.072830924 0.076552138 0.079435433 0.080912342 0.081628920 0.082849959 0.084708457 0.087929132 0.088662579 0.089568569 0.091199360 0.092998290 0.094206353 0.095324436 0.095835577 0.096729710 0.097847600 0.099186138 0.100028587 0.101265176 0.101889201 0.102927439 0.103135529 0.104305372 0.107360399 0.108949322 0.110864747 0.111183846 0.112088073 0.113094940 0.114637262 0.115134219 0.116513914 0.117344580 0.118148936 0.121051380 0.124064866 0.124725914 0.127593247 0.127920984 0.129519916 0.133221728 0.135224434 0.135740649 0.137149351 0.138086725 0.139981921 0.143326092 0.145234428 0.146119815 0.150153130 0.151388531 0.153035194 0.156354600 0.160149609 0.166002950 0.171001319 0.174637004 0.178031047 0.180856512 0.183476368 0.186701455 0.188092010 0.189698979 0.198139029 0.201872800 0.204682662 0.205421615 0.206379815 0.207162913 0.209110181 0.212156000 0.213084789 0.214714768 0.216645743 0.218596426 0.221773711 0.225038526 0.231591801 0.232765625 0.234338931 0.236163134 0.243056769 0.246035073 0.249633958 0.255207277 0.255597299 0.257042688 0.261455480 0.271388703 0.280168025 0.291280219 0.297940590 0.298940010 0.300404370 0.305836219 0.307395992 0.307597426 0.317969696 0.321037999 0.325298140 0.327802766 0.330390944 0.347046857 0.351154358 0.355352099 0.358049642 0.359350509 0.363904780 0.383369471 0.405931689 0.406617757 0.429604138 0.429943411 0.431731453 0.445780810 0.459593918 0.464639881 0.466717426 0.477887912 0.484721281 0.497775096 0.498057691 0.513199582 0.515191794 0.543070804 0.565491929 0.567236563 0.583600800 0.591216810 0.605476778 0.640879432 0.644693948 0.665634489 0.673923231 0.682741388 0.691717291 0.698205310 0.699485253 0.704244400 0.715049653 0.724259229 0.735348552 0.737691554 0.744335929 0.750710440 0.771591122 0.775924168 0.804578435 0.817398320 0.820977365 0.822750919 0.832441722 0.841492864 0.845212594 0.846891193 0.852271853 0.859046584 0.867350843 0.873172517 0.874509384 0.875410576 0.883736382 0.890457219 0.894991233 0.897018073 0.902377009 0.916318194 0.922452433 0.924346687 0.931499248 0.938933909 0.950425670 0.958650297 0.967252804 0.970671318 0.981991554 0.997145846 0.998529301 1.011800301 1.018414145 1.038875489 1.048988845 1.055311067 1.067923391 1.076396524 1.086933611 1.100231134 1.110218812 1.111363035 1.116762041 1.122485463 1.123481255 1.134551814 1.144475421 1.161326955 1.169892139 1.173199112 1.176249227 1.200545045 1.217065514 1.225401509 1.247336177 1.295306967 1.296037408 1.314263174 1.324554529 1.326340863 1.328018429 1.330159110 1.334548084 1.341056713 1.346135046 1.362445137 1.378803103 1.380917329 1.381452426 1.398941085 1.496309857 1.557663017 1.671870454 1.902301345</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">112</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94628697" y3="-0.94518489" z3="-0.69544225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5845584" y3="-1.94104584" z3="-1.64548834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06532168" y3="-0.98962969" z3="-1.49476589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75118012" y3="1.4769838" z3="-1.12086179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.3136408" y3="0.31884286" z3="-0.50240768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61784968" y3="2.71861493" z3="-1.0895022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98497445" y3="2.73170415" z3="-0.87531894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37511484" y3="4.98602801" z3="-0.33041412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78306406" y3="3.83296329" z3="-0.78847529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75574962" y3="5.86053937" z3="-0.10864377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0239178" y3="1.58289242" z3="-1.55781109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19936956" y3="0.37321947" z3="0.284256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7366449" y3="0.35737946" z3="-0.48674416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67937569" y3="0.68511746" z3="0.50118687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66280617" y3="-0.89149333" z3="-1.33706541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12767132" y3="-2.52837758" z3="-1.21266683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.33114956" y3="-5.5073088" z3="-6.12658644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00542449" y3="-5.07972653" z3="-5.17413303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.16046261" y3="-3.95473043" z3="-2.75515265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.99304006" y3="-3.70121743" z3="-5.00881307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62134779" y3="-5.91367722" z3="-4.12102618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21491928" y3="-5.34509557" z3="-2.92063097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.58010277" y3="-3.1066461" z3="-3.80558071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.29879549" y3="-3.0281872" z3="-5.81359371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65356498" y3="-7.00095155" z3="-4.2268089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95711881" y3="-5.9854299" z3="-2.07283758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69733692" y3="-3.41470278" z3="-1.52879819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34521154" y3="-3.89461217" z3="-0.84010062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68921824" y3="-4.88603816" z3="-1.14597478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44911168" y3="-3.62380993" z3="0.61058384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.64263477" y3="-3.21016516" z3="3.37249073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.87580145" y3="-4.65855287" z3="1.45303135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13425585" y3="-2.37789069" z3="1.16231274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22807591" y3="-2.17387969" z3="2.53519638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.9651468" y3="-4.45393849" z3="2.82799939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.10151243" y3="-5.64316454" z3="1.0337093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.17289326" y3="-1.53883467" z3="0.53679649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03114202" y3="-1.18997269" z3="2.9354242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.26767839" y3="-5.27848372" z3="3.47911309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.70641047" y3="-3.05361439" z3="4.45324754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.56731929" y3="-1.77122755" z3="-3.76312579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.6110163" y3="-1.37184908" z3="-2.84632245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30681314" y3="3.69357604" z3="-0.8761515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.06629409" y3="-2.97821045" z3="-1.76006715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91959486" y3="-3.15235721" z3="-0.66526874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13236124" y3="-2.2904989" z3="0.27402601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81336095" y3="-0.70406703" z3="0.53256621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.51153105" y3="-0.1333017" z3="-1.10412821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50786036" y3="0.37487636" z3="1.28156109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1884761" y3="-1.0348274" z3="1.75581565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45678156" y3="-4.35018388" z3="-0.48524697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.26208794" y3="-4.58491713" z3="0.65997805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.7424159" y3="0.27855987" z3="-1.77687156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.25712306" y3="0.66365998" z3="-0.92799791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.02238482" y3="-0.95886492" z3="-1.63354451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.57487984" y3="0.48615684" z3="0.69453616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21919611" y3="-0.01136447" z3="2.27201008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.94560818" y3="1.37975903" z3="1.42467425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63348128" y3="-0.07695237" z3="2.08095422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99614595" y3="-1.64720139" z3="1.31840965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.80442007" y3="-1.55086681" z3="2.65137323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.17800053" y3="-3.97257859" z3="0.62259137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.70555386" y3="-4.3651824" z3="1.58377905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.52651859" y3="-5.64972045" z3="0.61844463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33771882" y3="-2.18017213" z3="-0.13568299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.17098813" y3="-3.29714534" z3="-0.96693962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51179421" y3="-4.43459608" z3="-0.5159093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01763078" y3="-4.44755913" z3="0.78262664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.20668176" y3="-3.37625952" z3="1.65094888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.86514407" y3="-2.24557487" z3="1.18525897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51132321" y3="-3.25621249" z3="-2.0050117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3471284" y3="-5.28705852" z3="-1.17509181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23089491" y3="-5.59640913" z3="1.23623255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.81017402" y3="-3.42662659" z3="2.66583015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.98909551" y3="-1.38883214" z3="1.84857007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47207797" y3="3.98476306" z3="0.25111883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85020954" y3="3.80770457" z3="0.23366494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44592117" y3="3.34293204" z3="-0.9324395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70540275" y3="3.068132" z3="-2.08048995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32605047" y3="3.23390225" z3="-2.04064155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01942261" y3="4.3137433" z3="1.17111828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45988237" y3="4.00779665" z3="1.11557595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89198433" y3="3.1135283" z3="-0.95085927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.21003397" y3="2.7160134" z3="-2.98015573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27063721" y3="2.99295506" z3="-2.92190325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.08585558" y3="-5.75117425" z3="2.4278805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75043184" y3="-6.32290197" z3="0.38566584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43144304" y3="2.97540132" z3="-2.02933636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47168923" y3="3.05654428" z3="0.11748843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55045034" y3="0.16193896" z3="-2.16721486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86944511" y3="1.40443666" z3="-2.01390874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67540406" y3="0.08463237" z3="-3.03435849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.09176304" y3="1.18046526" z3="-3.74889437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19636491" y3="-0.87272104" z3="-3.13297629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.95370948" y3="1.10807137" z3="-4.41809815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.30762619" y3="2.51279703" z3="-2.79151534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.38830328" y3="2.40367353" z3="-3.63353381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.76824341" y3="3.45968802" z3="-2.72169162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.70338414" y3="3.2680253" z3="-4.22500076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58765383" y3="3.91645708" z3="-0.33692187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77393052" y3="5.06356508" z3="-0.10384081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96472544" y3="3.98899572" z3="0.01582185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50860427" y3="5.14782787" z3="0.51549091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59498964" y3="3.10646203" z3="-0.10775077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56944815" y3="5.17751409" z3="0.77904084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36826632" y3="6.25230663" z3="0.40269967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70753562" y3="6.30027081" z3="0.69932235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73259562" y3="7.1285997" z3="0.56289784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1537329" y3="7.21849276" z3="1.09117557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.24869858" y3="-3.89515314" z3="-2.95272602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47547431" y3="-4.93150826" z3="-2.65910989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.07888506" y3="-3.53587038" z3="-3.5900437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.33922777" y3="-3.90052946" z3="-3.57434657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.57619572" y3="-1.59463795" z3="-2.09070506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.28267254" y3="-1.07758162" z3="-2.7654613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.41122175" y3="-0.96382263" z3="-1.20168781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.61820249" y3="-1.65096299" z3="-2.62791922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9463,-.9452,-.6954;6.5846,-1.941,-1.6455;6.0653,-.9896,-1.4948;4.7512,1.477,-1.1209;4.3136,.3188,-.5024;2.6178,2.7186,-1.0895;3.985,2.7317,-.8753;2.3751,4.986,-.3304;1.7831,3.833,-.7885;1.7557,5.8605,-.1086;2.0239,1.5829,-1.5578;3.1994,.3732,.2843;1.7366,.3574,-.4867;.6794,.6851,.5012;1.6628,-.8915,-1.3371;1.1277,-2.5284,-1.2127;2.3311,-5.5073,-6.1266;2.0054,-5.0797,-5.1741;1.1605,-3.9547,-2.7552;1.993,-3.7012,-5.0088;1.6213,-5.9137,-4.121;1.2149,-5.3451,-2.9206;1.5801,-3.1066,-3.8056;2.2988,-3.0282,-5.8136;1.6536,-7.001,-4.2268;.9571,-5.9854,-2.0728;.6973,-3.4147,-1.5288;-.3452,-3.8946,-.8401;-.6892,-4.886,-1.146;-.4491,-3.6238,.6106;-.6426,-3.2102,3.3725;-.8758,-4.6586,1.453;-.1343,-2.3779,1.1623;-.2281,-2.1739,2.5352;-.9651,-4.4539,2.828;-1.1015,-5.6432,1.0337;.1729,-1.5388,.5368;.0311,-1.19,2.9354;-1.2677,-5.2785,3.4791;-.7064,-3.0536,4.4532;1.5673,-1.7712,-3.7631;1.611,-1.3718,-2.8463;.3068,3.6936,-.8762;-2.0663,-2.9782,-1.7601;-2.9196,-3.1524,-.6653;-3.1324,-2.2905,.274;-3.8134,-.7041,.5326;-4.5115,-.1333,-1.1041;-2.5079,.3749,1.2816;-5.1885,-1.0348,1.7558;-3.4568,-4.3502,-.4852;-4.2621,-4.5849,.66;-3.7424,.2786,-1.7769;-5.2571,.6637,-.928;-5.0224,-.9589,-1.6335;-1.5749,.4862,.6945;-2.2192,-.0114,2.272;-2.9456,1.3798,1.4247;-5.6335,-.077,2.081;-5.9961,-1.6472,1.3184;-4.8044,-1.5509,2.6514;-5.178,-3.9726,.6226;-3.7056,-4.3652,1.5838;-4.5265,-5.6497,.6184;4.3377,-2.1802,-.1357;4.171,-3.2971,-.9669;3.5118,-4.4346,-.5159;3.0176,-4.4476,.7826;3.2067,-3.3763,1.6509;3.8651,-2.2456,1.1853;4.5113,-3.2562,-2.005;3.3471,-5.2871,-1.1751;2.2309,-5.5964,1.2362;2.8102,-3.4266,2.6658;3.9891,-1.3888,1.8486;-.4721,3.9848,.2511;-1.8502,3.8077,.2337;-2.4459,3.3429,-.9324;-1.7054,3.0681,-2.0805;-.3261,3.2339,-2.0406;.0194,4.3137,1.1711;-2.4599,4.0078,1.1156;-3.892,3.1135,-.9509;-2.21,2.716,-2.9802;.2706,2.993,-2.9219;2.0859,-5.7512,2.4279;1.7504,-6.3229,.3857;-4.4314,2.9754,-2.0293;-4.4717,3.0565,.1175;6.5505,.1619,-2.1672;5.8694,1.4044,-2.0139;7.6754,.0846,-3.0344;8.0918,1.1805,-3.7489;8.1964,-.8727,-3.133;8.9537,1.1081,-4.4181;6.3076,2.5128,-2.7915;7.3883,2.4037,-3.6335;5.7682,3.4597,-2.7217;7.7034,3.268,-4.225;4.5877,3.9165,-.3369;3.7739,5.0636,-.1038;5.9647,3.989,.0158;6.5086,5.1478,.5155;6.595,3.1065,-.1078;7.5694,5.1775,.779;4.3683,6.2523,.4027;5.7075,6.3003,.6993;3.7326,7.1286,.5629;6.1537,7.2185,1.0912;-2.2487,-3.8952,-2.9527;-2.4755,-4.9315,-2.6591;-3.0789,-3.5359,-3.59;-1.3392,-3.9005,-3.5743;-1.5762,-1.5946,-2.0907;-2.2827,-1.0776,-2.7655;-1.4112,-.9638,-1.2017;-.6182,-1.651,-2.6279;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662576137125</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004759168782 0.000689021663 0.022756476549 0.005337103461</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055834227 -0.002137947 0.000135029 0.000217616 0.000322609 0.000376119 0.000394360 0.000500006 0.000541749 0.000635295 0.000766249 0.000830968 0.001017827 0.001100753 0.001247184 0.001261990 0.001291917 0.001409751 0.001516029 0.001695829 0.001788426 0.002142090 0.002284916 0.002701066 0.003022927 0.003311331 0.003678482 0.003781193 0.004026232 0.004458973 0.004853214 0.005097804 0.005317802 0.005749505 0.005881034 0.006029752 0.006677962 0.006971026 0.007233026 0.007834433 0.007999894 0.008666733 0.009322216 0.009559939 0.010148745 0.010642690 0.010944731 0.011723305 0.012792976 0.013058310 0.013326333 0.014468532 0.014584056 0.015290033 0.015557297 0.015695855 0.016069221 0.016372451 0.017789632 0.018218359 0.018749621 0.019215216 0.020222620 0.021199125 0.021686499 0.022611490 0.022756361 0.023256824 0.024332954 0.025498986 0.025705870 0.026313652 0.026710104 0.026891454 0.027826987 0.028441485 0.030053987 0.030449174 0.032119807 0.032648797 0.033549668 0.035111691 0.038627767 0.038836658 0.041012506 0.041346862 0.045210649 0.045246983 0.045496946 0.047342749 0.048752056 0.049677578 0.051491800 0.051671275 0.051831706 0.052281246 0.052367505 0.052571924 0.053126451 0.054249029 0.055115238 0.055870792 0.056502456 0.056893054 0.057175278 0.057827783 0.058647069 0.059226669 0.060024458 0.060813607 0.061522105 0.062584142 0.063919999 0.064552109 0.064705137 0.066122559 0.066985884 0.067991881 0.068666292 0.069830909 0.071612190 0.072359751 0.072515307 0.072835755 0.076553649 0.079574638 0.080919051 0.081863749 0.082850117 0.084733191 0.087935263 0.088663319 0.089569274 0.091199118 0.093021356 0.094208069 0.095324483 0.095835737 0.096739757 0.097848494 0.099186093 0.100032495 0.101266747 0.101909542 0.102933779 0.103137462 0.104316867 0.107375647 0.108948912 0.110869094 0.111187577 0.112094383 0.113123646 0.114636875 0.115181753 0.116522790 0.117364559 0.118152589 0.121049463 0.124065177 0.124724391 0.127611540 0.127924096 0.129563791 0.133223650 0.135224322 0.135762073 0.137149911 0.138311092 0.139987327 0.143328161 0.145248878 0.146120399 0.150198752 0.151388456 0.153041045 0.156394828 0.160161728 0.166003433 0.171006220 0.174648223 0.178071953 0.180859658 0.183476437 0.186722742 0.188147530 0.189712165 0.198308028 0.201874105 0.205302786 0.205429701 0.206525337 0.207166481 0.209111355 0.212161318 0.213085079 0.214749194 0.216843078 0.218755390 0.221779553 0.225048010 0.231610079 0.232766394 0.234362919 0.236244973 0.243235842 0.246171476 0.249636849 0.255227380 0.255648502 0.257043490 0.261474289 0.271390399 0.280345707 0.291284875 0.297993913 0.298940141 0.300407537 0.305894783 0.307461332 0.307597417 0.317971636 0.321040496 0.325298393 0.327803369 0.330485133 0.347085994 0.351167826 0.355358891 0.358058512 0.359353428 0.363910655 0.383403689 0.406094894 0.406980246 0.429721876 0.429946986 0.431825483 0.445798945 0.459763642 0.464672013 0.466869621 0.477887942 0.484741253 0.497798629 0.498057817 0.513203488 0.515199356 0.543070940 0.565491817 0.567237668 0.583626567 0.591217920 0.605483475 0.640910630 0.644697082 0.665638250 0.673926372 0.683024891 0.691717491 0.698203505 0.699535300 0.704244620 0.715049909 0.724263573 0.735366648 0.737691554 0.744471242 0.750711168 0.771591266 0.775924293 0.804649539 0.817446631 0.821037184 0.823181758 0.832480138 0.841703177 0.845247566 0.846891662 0.852507028 0.859104031 0.867351351 0.873263226 0.874662976 0.875542587 0.883913684 0.890457253 0.895293060 0.897035919 0.902397520 0.916318622 0.922680759 0.924348211 0.931553429 0.938976212 0.951298162 0.958701665 0.967273509 0.970751541 0.982009413 0.997839122 0.998555304 1.011857875 1.018416377 1.038876137 1.049002213 1.055312111 1.067926069 1.076429180 1.086935953 1.100235444 1.110218842 1.111375378 1.116843472 1.122485463 1.123481283 1.134566307 1.144528662 1.161327099 1.169894363 1.173260110 1.176274504 1.200546333 1.217213971 1.225791892 1.247338076 1.295329038 1.296050187 1.314280038 1.324676833 1.326341237 1.328049276 1.330159068 1.334549207 1.341057123 1.346135074 1.362445108 1.378803797 1.380918118 1.381454055 1.399143789 1.497610745 1.557665288 1.671870585 1.903284856</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">113</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94054555" y3="-0.9463383" z3="-0.694032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58061177" y3="-1.94363913" z3="-1.63929391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06174878" y3="-0.99178597" z3="-1.49022014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74912107" y3="1.476251" z3="-1.119857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30874651" y3="0.31837232" z3="-0.50273213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61718465" y3="2.72192568" z3="-1.0925374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98402198" y3="2.73220022" z3="-0.87528147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37715425" y3="4.98989116" z3="-0.33311468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78415412" y3="3.83822532" z3="-0.79340479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75860751" y3="5.86545103" z3="-0.11128729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02214989" y3="1.58742627" z3="-1.56275973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.19258259" y3="0.3738897" z3="0.28118105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73190271" y3="0.36046981" z3="-0.49382059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.67250747" y3="0.6873184" z3="0.49238052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66014256" y3="-0.88742448" z3="-1.34585059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12547232" y3="-2.52256416" z3="-1.21807881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32914631" y3="-5.50372779" z3="-6.13028064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.0036059" y3="-5.07571733" z3="-5.17786033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15861156" y3="-3.95040803" z3="-2.75924815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.98632326" y3="-3.69680622" z3="-5.01453068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62413816" y3="-5.90953124" z3="-4.12297619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21774036" y3="-5.34079492" z3="-2.92258094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.57232802" y3="-3.10196715" z3="-3.81157472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.2883919" y3="-3.02424138" z3="-5.8211537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65983522" y3="-6.99686577" z3="-4.22734825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9634856" y3="-5.98080401" z3="-2.07345292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69605833" y3="-3.4103794" z3="-1.53257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34242981" y3="-3.89263985" z3="-0.84152463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68742172" y3="-4.88358223" z3="-1.14725679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44563539" y3="-3.62047997" z3="0.60888766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.63160501" y3="-3.20762874" z3="3.37122961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.86425569" y3="-4.6573337" z3="1.45281971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13579851" y3="-2.37271293" z3="1.15913567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22584361" y3="-2.16915434" z3="2.53229316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.94951838" y3="-4.4531289" z3="2.8281109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.08589788" y3="-5.64331706" z3="1.03444221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.16443612" y3="-1.53196197" z3="0.5324615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02983216" y3="-1.18401806" z3="2.93159516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.24492191" y3="-5.27936239" z3="3.48038254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.69206616" y3="-3.05146574" z3="4.4521902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.55049873" y3="-1.76635064" z3="-3.76853487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.60861637" y3="-1.36800455" z3="-2.85715807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30765942" y3="3.70125542" z3="-0.88274259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07227365" y3="-2.97719199" z3="-1.76018713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92014797" y3="-3.15269629" z3="-0.66320317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13087467" y3="-2.29078865" z3="0.27639579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81483766" y3="-0.70500194" z3="0.53241829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.52007766" y3="-0.13689317" z3="-1.09937532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50823284" y3="0.37857455" z3="1.28000396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18799469" y3="-1.0388451" z3="1.75956292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.45448088" y3="-4.35144207" z3="-0.47939047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.25297654" y3="-4.58725199" z3="0.6702698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.75543291" y3="0.27186306" z3="-1.77764966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.25947816" y3="0.66308685" z3="-0.91951785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.03618814" y3="-0.96201065" z3="-1.62316582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58377575" y3="0.4891681" z3="0.68968413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22063019" y3="-0.01127516" z3="2.27460602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.94872063" y3="1.38333282" z3="1.42140005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63661911" y3="-0.08310485" z3="2.08596458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99447744" y3="-1.6545953" z3="1.32316016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.80209825" y3="-1.5548375" z3="2.65802859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.17039991" y3="-3.97720856" z3="0.63790696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.6916747" y3="-4.36547986" z3="1.5908815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.5152847" y3="-5.65289116" z3="0.63131402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.33062636" y3="-2.18131389" z3="-0.13544397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.16784474" y3="-3.29900341" z3="-0.96655036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51071885" y3="-4.43790255" z3="-0.51630203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01490589" y3="-4.45194134" z3="0.781583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19878741" y3="-3.37942365" z3="1.64942072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.85473533" y3="-2.24699979" z3="1.18430191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.51028855" y3="-3.25780167" z3="-2.00388923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34927834" y3="-5.2908441" z3="-1.17554633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23300599" y3="-5.6040114" z3="1.23525006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.80051663" y3="-3.4303489" z3="2.66358874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.97474235" y3="-1.38954368" z3="1.84735223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4719957" y3="3.98931745" z3="0.24524154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84843691" y3="3.80688834" z3="0.22945546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4434036" y3="3.3440935" z3="-0.93926554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70120598" y3="3.07133883" z3="-2.0854805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32377223" y3="3.24183064" z3="-2.04680656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01574866" y3="4.32070501" z3="1.16368921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45828334" y3="4.00404531" z3="1.11238198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88903978" y3="3.11128735" z3="-0.95780901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.2056393" y3="2.72252021" z3="-2.98851439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27328383" y3="3.00486195" z3="-2.92997473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.09110014" y3="-5.76091989" z3="2.42697587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7533786" y3="-6.33111861" z3="0.38469507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42566401" y3="2.96608694" z3="-2.03280921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46935088" y3="3.0550273" z3="0.11026548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54987569" y3="0.15933827" z3="-2.16130258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86981628" y3="1.40254909" z3="-2.00979805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67726627" y3="0.08088194" z3="-3.02502869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.09711954" y3="1.17641595" z3="-3.73790171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19731537" y3="-0.87708116" z3="-3.12237163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.96093556" y3="1.10319158" z3="-4.40446607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.31176663" y3="2.51057318" z3="-2.78562051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.39485742" y3="2.40043483" z3="-3.62418217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.77346843" y3="3.45814587" z3="-2.71700282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.71278519" y3="3.26463793" z3="-4.21423683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58777445" y3="3.91581585" z3="-0.33518241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77546878" y3="5.06462416" z3="-0.10361903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96462836" y3="3.98590581" z3="0.02019341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50973184" y3="5.14404379" z3="0.52034668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59394093" y3="3.10217398" z3="-0.10206843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.570554" y3="5.17183567" z3="0.78562773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37101752" y3="6.25258025" z3="0.40333628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.7102173" y3="6.29823946" z3="0.70206857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73660781" y3="7.13025771" z3="0.56128402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15753402" y3="7.21600359" z3="1.09385273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.25250115" y3="-3.89865196" z3="-2.95042041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.47744553" y3="-4.93467775" z3="-2.65404016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.08361453" y3="-3.54204721" z3="-3.58837301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.34319436" y3="-3.9043084" z3="-3.57243172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.58411915" y3="-1.59360066" z3="-2.09392129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.2904198" y3="-1.07875461" z3="-2.77014012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.41968896" y3="-0.96298596" z3="-1.20618416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.62249523" y3="-1.65075579" z3="-2.62941949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9405,-.9463,-.694;6.5806,-1.9436,-1.6393;6.0617,-.9918,-1.4902;4.7491,1.4763,-1.1199;4.3087,.3184,-.5027;2.6172,2.7219,-1.0925;3.984,2.7322,-.8753;2.3772,4.9899,-.3331;1.7842,3.8382,-.7934;1.7586,5.8655,-.1113;2.0221,1.5874,-1.5628;3.1926,.3739,.2812;1.7319,.3605,-.4938;.6725,.6873,.4924;1.6601,-.8874,-1.3459;1.1255,-2.5226,-1.2181;2.3291,-5.5037,-6.1303;2.0036,-5.0757,-5.1779;1.1586,-3.9504,-2.7592;1.9863,-3.6968,-5.0145;1.6241,-5.9095,-4.123;1.2177,-5.3408,-2.9226;1.5723,-3.102,-3.8116;2.2884,-3.0242,-5.8212;1.6598,-6.9969,-4.2273;.9635,-5.9808,-2.0735;.6961,-3.4104,-1.5326;-.3424,-3.8926,-.8415;-.6874,-4.8836,-1.1473;-.4456,-3.6205,.6089;-.6316,-3.2076,3.3712;-.8643,-4.6573,1.4528;-.1358,-2.3727,1.1591;-.2258,-2.1692,2.5323;-.9495,-4.4531,2.8281;-1.0859,-5.6433,1.0344;.1644,-1.532,.5325;.0298,-1.184,2.9316;-1.2449,-5.2794,3.4804;-.6921,-3.0515,4.4522;1.5505,-1.7664,-3.7685;1.6086,-1.368,-2.8572;.3077,3.7013,-.8827;-2.0723,-2.9772,-1.7602;-2.9201,-3.1527,-.6632;-3.1309,-2.2908,.2764;-3.8148,-.705,.5324;-4.5201,-.1369,-1.0994;-2.5082,.3786,1.28;-5.188,-1.0388,1.7596;-3.4545,-4.3514,-.4794;-4.253,-4.5873,.6703;-3.7554,.2719,-1.7776;-5.2595,.6631,-.9195;-5.0362,-.962,-1.6232;-1.5838,.4892,.6897;-2.2206,-.0113,2.2746;-2.9487,1.3833,1.4214;-5.6366,-.0831,2.086;-5.9945,-1.6546,1.3232;-4.8021,-1.5548,2.658;-5.1704,-3.9772,.6379;-3.6917,-4.3655,1.5909;-4.5153,-5.6529,.6313;4.3306,-2.1813,-.1354;4.1678,-3.299,-.9666;3.5107,-4.4379,-.5163;3.0149,-4.4519,.7816;3.1988,-3.3794,1.6494;3.8547,-2.247,1.1843;4.5103,-3.2578,-2.0039;3.3493,-5.2908,-1.1755;2.233,-5.604,1.2353;2.8005,-3.4303,2.6636;3.9747,-1.3895,1.8474;-.472,3.9893,.2452;-1.8484,3.8069,.2295;-2.4434,3.3441,-.9393;-1.7012,3.0713,-2.0855;-.3238,3.2418,-2.0468;.0157,4.3207,1.1637;-2.4583,4.004,1.1124;-3.889,3.1113,-.9578;-2.2056,2.7225,-2.9885;.2733,3.0049,-2.93;2.0911,-5.7609,2.427;1.7534,-6.3311,.3847;-4.4257,2.9661,-2.0328;-4.4694,3.055,.1103;6.5499,.1593,-2.1613;5.8698,1.4025,-2.0098;7.6773,.0809,-3.025;8.0971,1.1764,-3.7379;8.1973,-.8771,-3.1224;8.9609,1.1032,-4.4045;6.3118,2.5106,-2.7856;7.3949,2.4004,-3.6242;5.7735,3.4581,-2.717;7.7128,3.2646,-4.2142;4.5878,3.9158,-.3352;3.7755,5.0646,-.1036;5.9646,3.9859,.0202;6.5097,5.144,.5203;6.5939,3.1022,-.1021;7.5706,5.1718,.7856;4.371,6.2526,.4033;5.7102,6.2982,.7021;3.7366,7.1303,.5613;6.1575,7.216,1.0939;-2.2525,-3.8987,-2.9504;-2.4774,-4.9347,-2.654;-3.0836,-3.542,-3.5884;-1.3432,-3.9043,-3.5724;-1.5841,-1.5936,-2.0939;-2.2904,-1.0788,-2.7701;-1.4197,-.963,-1.2062;-.6225,-1.6508,-2.6294;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662600869948</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004039234980 0.000656575448 0.023226800383 0.005338747762</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.055937782 -0.002177689 0.000135958 0.000220749 0.000323654 0.000377793 0.000395027 0.000498809 0.000544052 0.000637847 0.000766427 0.000830933 0.001030343 0.001101357 0.001247387 0.001263540 0.001292545 0.001411837 0.001516560 0.001698109 0.001790317 0.002143357 0.002291304 0.002711175 0.003026684 0.003312196 0.003678469 0.003782384 0.004027497 0.004493517 0.004853585 0.005099190 0.005319716 0.005756337 0.005880550 0.006030739 0.006717050 0.006974687 0.007232397 0.007838135 0.008063490 0.008676763 0.009324425 0.009580250 0.010163846 0.010686266 0.010944624 0.011724851 0.012793611 0.013061204 0.013333828 0.014468962 0.014584707 0.015290320 0.015558454 0.015695504 0.016078989 0.016372399 0.017788651 0.018218752 0.018817396 0.019253535 0.020223195 0.021203990 0.021686338 0.022612619 0.022765393 0.023257837 0.024335140 0.025500460 0.025713601 0.026318661 0.026710342 0.026899961 0.027835890 0.028456115 0.030054766 0.030448868 0.032118677 0.032649927 0.033618564 0.035113127 0.038633311 0.038841120 0.041014591 0.041405487 0.045213884 0.045252287 0.045545400 0.047461073 0.048819638 0.049678239 0.051492223 0.051671692 0.051831855 0.052281381 0.052367966 0.052574865 0.053147104 0.054280517 0.055246876 0.055877473 0.056503270 0.056893119 0.057175628 0.057830583 0.058647874 0.059227446 0.060035109 0.060816940 0.061533964 0.062586184 0.063927274 0.064584293 0.064712022 0.066122475 0.067048466 0.067993017 0.068668695 0.069845471 0.071612591 0.072359452 0.072561695 0.072847809 0.076556412 0.079691384 0.080918573 0.082068284 0.082850128 0.084800730 0.087940212 0.088663619 0.089569241 0.091201094 0.093050173 0.094207724 0.095324931 0.095837334 0.096749016 0.097848897 0.099187960 0.100051919 0.101269113 0.101911317 0.102961088 0.103137801 0.104321674 0.107411861 0.108962310 0.110876675 0.111192991 0.112093871 0.113146283 0.114642910 0.115179248 0.116529531 0.117368855 0.118183808 0.121063849 0.124069974 0.124739393 0.127623618 0.127924242 0.129563027 0.133226068 0.135246504 0.135778851 0.137156930 0.138357987 0.139990290 0.143328096 0.145254259 0.146120036 0.150367550 0.151392784 0.153046917 0.156615438 0.160184254 0.166004448 0.171006471 0.174651946 0.178079563 0.180859294 0.183476298 0.186730441 0.188168696 0.189715008 0.198376419 0.201874193 0.205414438 0.205863157 0.206978208 0.207205729 0.209112413 0.212166246 0.213085061 0.214775440 0.217045277 0.218879857 0.221783147 0.225057289 0.231626311 0.232767187 0.234380092 0.236276771 0.243437097 0.246380461 0.249643055 0.255241490 0.255699773 0.257043458 0.261473290 0.271393026 0.280412341 0.291286264 0.298029542 0.298943713 0.300415538 0.305965356 0.307477047 0.307598488 0.317976846 0.321042102 0.325298666 0.327804840 0.330507631 0.347106806 0.351175341 0.355360822 0.358095881 0.359355065 0.363912778 0.383429951 0.406152587 0.407262507 0.429821111 0.429954204 0.431910684 0.445819924 0.459942147 0.464692139 0.467020631 0.477888349 0.484752923 0.497884128 0.498060437 0.513210059 0.515218623 0.543071014 0.565492611 0.567239818 0.583640146 0.591218969 0.605488104 0.640958159 0.644703699 0.665639523 0.673945880 0.683247205 0.691718222 0.698293135 0.699589026 0.704244689 0.715054867 0.724299272 0.735382398 0.737691923 0.744629841 0.750711446 0.771591269 0.775924476 0.804707988 0.817495258 0.821083472 0.823556888 0.832523638 0.841914501 0.845249965 0.846894600 0.852679811 0.859160731 0.867352406 0.873311909 0.874661786 0.875685879 0.883989789 0.890469744 0.895457284 0.897047847 0.902421689 0.916322443 0.922751697 0.924348496 0.931576405 0.938975925 0.952408216 0.958798430 0.967288531 0.970944952 0.982021044 0.998429756 0.998925072 1.011893114 1.018422475 1.038879477 1.049010189 1.055312370 1.067947267 1.076455152 1.086943072 1.100276201 1.110218919 1.111390407 1.116921096 1.122485750 1.123481754 1.134585141 1.144586324 1.161328704 1.169895010 1.173308498 1.176296340 1.200546961 1.217303640 1.226079626 1.247338086 1.295344019 1.296056017 1.314285096 1.324734422 1.326342179 1.328072484 1.330159566 1.334552515 1.341057097 1.346135369 1.362445193 1.378803927 1.380918775 1.381459705 1.399144755 1.498540355 1.557665628 1.671870548 1.904101486</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">114</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93474504" y3="-0.94707945" z3="-0.69276845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57637547" y3="-1.94595639" z3="-1.63372336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05808177" y3="-0.99358333" z3="-1.48593289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74787916" y3="1.4759299" z3="-1.11770032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30405298" y3="0.31834297" z3="-0.50250636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61834081" y3="2.72473624" z3="-1.09541888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98439823" y3="2.73297424" z3="-0.87472692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37946245" y3="4.99263729" z3="-0.3363244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78594236" y3="3.84157482" z3="-0.79733978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76177973" y3="5.86875301" z3="-0.11622862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02294172" y3="1.59148899" z3="-1.56785328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.18572933" y3="0.37488169" z3="0.27832627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72737933" y3="0.36450071" z3="-0.50098406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.66536959" y3="0.69244449" z3="0.4818088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65599122" y3="-0.88235477" z3="-1.35452324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.12354186" y3="-2.51713373" z3="-1.22342144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.32487887" y3="-5.5014469" z3="-6.13463226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="2.00001442" y3="-5.0730417" z3="-5.18219457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15721774" y3="-3.94630693" z3="-2.76335952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.97913948" y3="-3.69409687" z3="-5.02109595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62549751" y3="-5.90630454" z3="-4.12505307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21990492" y3="-5.33677575" z3="-2.92477515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.56699266" y3="-3.09864014" z3="-3.81799885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.27732543" y3="-3.02164439" z3="-5.82924416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66445562" y3="-6.9936667" z3="-4.22769562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96916233" y3="-5.9761536" z3="-2.07405595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69522115" y3="-3.40581762" z3="-1.53673593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34285004" y3="-3.88872994" z3="-0.84409341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68500963" y3="-4.88134401" z3="-1.14815119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.44229719" y3="-3.61686048" z3="0.606736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.61991642" y3="-3.20389312" z3="3.36971215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.85230765" y3="-4.65551145" z3="1.4525916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13744391" y3="-2.36701999" z3="1.15536785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.22329986" y3="-2.16335395" z3="2.52877071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.93320856" y3="-4.45132987" z3="2.82825081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.07043428" y3="-5.64274099" z3="1.0354349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.15546706" y3="-1.52466187" z3="0.52726473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02838245" y3="-1.17647923" z3="2.9266981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.22169511" y3="-5.27891608" z3="3.48188006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.67695966" y3="-3.04764" z3="4.45088459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.54454584" y3="-1.76320076" z3="-3.77897665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.59535814" y3="-1.36193308" z3="-2.86401198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30967544" y3="3.70417585" z3="-0.88778137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07341147" y3="-2.97964903" z3="-1.7597343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91932289" y3="-3.15492074" z3="-0.65961428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13113905" y3="-2.29101198" z3="0.27810578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8188125" y3="-0.70725038" z3="0.53623721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.52904442" y3="-0.14255881" z3="-1.09591536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51522164" y3="0.3789853" z3="1.27682196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18688845" y3="-1.04256085" z3="1.7670572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44886318" y3="-4.35518707" z3="-0.47187747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.24286545" y3="-4.59052896" z3="0.68116689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.76396505" y3="0.26237317" z3="-1.7787375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.26822212" y3="0.66094606" z3="-0.91736245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.05175431" y3="-0.96602465" z3="-1.6132288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58214944" y3="0.49314101" z3="0.68661047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22162363" y3="-0.00493518" z3="2.26777104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95442954" y3="1.38288557" z3="1.41921657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6351225" y3="-0.08624872" z3="2.09281778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99396744" y3="-1.65928463" z3="1.33468499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.79673671" y3="-1.55736682" z3="2.66218458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.16223225" y3="-3.98264923" z3="0.65007287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.67903554" y3="-4.36499056" z3="1.59970675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.50207749" y3="-5.65716936" z3="0.64516718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.32333751" y3="-2.18196974" z3="-0.13566335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1634665" y3="-3.29993097" z3="-0.96690715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50862506" y3="-4.44040004" z3="-0.51718111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0124896" y3="-4.45594841" z3="0.78052398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.19207651" y3="-3.38248382" z3="1.64804927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.84526875" y3="-2.24828284" z3="1.18326795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50701495" y3="-3.25811273" z3="-2.00383046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34936358" y3="-5.2934969" z3="-1.17681986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23580779" y3="-5.61133576" z3="1.23465681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.79295512" y3="-3.43425315" z3="2.66184124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.96219073" y3="-1.39033111" z3="1.84618344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46983737" y3="3.9893467" z3="0.24128881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84691882" y3="3.80735709" z3="0.22385894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44188431" y3="3.34554382" z3="-0.94552161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70005931" y3="3.0758533" z3="-2.09297603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32180256" y3="3.24719235" z3="-2.05375423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.02100537" y3="4.31575876" z3="1.1631119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45798471" y3="4.0039196" z3="1.10443464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88826264" y3="3.11272774" z3="-0.96546389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.20316601" y3="2.72457715" z3="-2.99362045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27618654" y3="3.01053962" z3="-2.93472408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.09683213" y3="-5.7697809" z3="2.42655035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75753318" y3="-6.33975387" z3="0.38448234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42821902" y3="2.9707063" z3="-2.04365037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46762253" y3="3.05694645" z3="0.10324725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54951003" y3="0.15706294" z3="-2.15523494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87069742" y3="1.40109329" z3="-2.00498035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67920293" y3="0.07740621" z3="-3.01589429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1025101" y3="1.17265491" z3="-3.72717835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19826767" y3="-0.88120525" z3="-3.11204706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.96818072" y3="1.09857747" z3="-4.39125451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3161339" y3="2.50878438" z3="-2.77943787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.40143742" y3="2.3975024" z3="-3.61513019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.778838" y3="3.45699859" z3="-2.71225418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.72218505" y3="3.26150301" z3="-4.20401956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58850762" y3="3.91564467" z3="-0.33325882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77758683" y3="5.06560506" z3="-0.10416343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96423078" y3="3.9835476" z3="0.02586252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50991481" y3="5.14079306" z3="0.52729179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59210544" y3="3.09878039" z3="-0.0943862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56967878" y3="5.16692397" z3="0.79570315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37380534" y3="6.25261898" z3="0.40415876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71193218" y3="6.29618007" z3="0.70663541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74029159" y3="7.13127746" z3="0.56112662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15957813" y3="7.21321475" z3="1.0996047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.25588401" y3="-3.901546" z3="-2.94845355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48018357" y3="-4.93707614" z3="-2.6512101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.08768027" y3="-3.54569238" z3="-3.58491881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.34753339" y3="-3.90716796" z3="-3.5717713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.59058574" y3="-1.59482591" z3="-2.09702867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.29901692" y3="-1.08383315" z3="-2.77312945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.42839578" y3="-0.95985297" z3="-1.21077919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.62999058" y3="-1.64950829" z3="-2.6328458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9347,-.9471,-.6928;6.5764,-1.946,-1.6337;6.0581,-.9936,-1.4859;4.7479,1.4759,-1.1177;4.3041,.3183,-.5025;2.6183,2.7247,-1.0954;3.9844,2.733,-.8747;2.3795,4.9926,-.3363;1.7859,3.8416,-.7973;1.7618,5.8688,-.1162;2.0229,1.5915,-1.5679;3.1857,.3749,.2783;1.7274,.3645,-.501;.6654,.6924,.4818;1.656,-.8824,-1.3545;1.1235,-2.5171,-1.2234;2.3249,-5.5014,-6.1346;2,-5.073,-5.1822;1.1572,-3.9463,-2.7634;1.9791,-3.6941,-5.0211;1.6255,-5.9063,-4.1251;1.2199,-5.3368,-2.9248;1.567,-3.0986,-3.818;2.2773,-3.0216,-5.8292;1.6645,-6.9937,-4.2277;.9692,-5.9762,-2.0741;.6952,-3.4058,-1.5367;-.3429,-3.8887,-.8441;-.685,-4.8813,-1.1482;-.4423,-3.6169,.6067;-.6199,-3.2039,3.3697;-.8523,-4.6555,1.4526;-.1374,-2.367,1.1554;-.2233,-2.1634,2.5288;-.9332,-4.4513,2.8283;-1.0704,-5.6427,1.0354;.1555,-1.5247,.5273;.0284,-1.1765,2.9267;-1.2217,-5.2789,3.4819;-.677,-3.0476,4.4509;1.5445,-1.7632,-3.779;1.5954,-1.3619,-2.864;.3097,3.7042,-.8878;-2.0734,-2.9796,-1.7597;-2.9193,-3.1549,-.6596;-3.1311,-2.291,.2781;-3.8188,-.7073,.5362;-4.529,-.1426,-1.0959;-2.5152,.379,1.2768;-5.1869,-1.0426,1.7671;-3.4489,-4.3552,-.4719;-4.2429,-4.5905,.6812;-3.764,.2624,-1.7787;-5.2682,.6609,-.9174;-5.0518,-.966,-1.6132;-1.5821,.4931,.6866;-2.2216,-.0049,2.2678;-2.9544,1.3829,1.4192;-5.6351,-.0862,2.0928;-5.994,-1.6593,1.3347;-4.7967,-1.5574,2.6622;-5.1622,-3.9826,.6501;-3.679,-4.365,1.5997;-4.5021,-5.6572,.6452;4.3233,-2.182,-.1357;4.1635,-3.2999,-.9669;3.5086,-4.4404,-.5172;3.0125,-4.4559,.7805;3.1921,-3.3825,1.648;3.8453,-2.2483,1.1833;4.507,-3.2581,-2.0038;3.3494,-5.2935,-1.1768;2.2358,-5.6113,1.2347;2.793,-3.4343,2.6618;3.9622,-1.3903,1.8462;-.4698,3.9893,.2413;-1.8469,3.8074,.2239;-2.4419,3.3455,-.9455;-1.7001,3.0759,-2.093;-.3218,3.2472,-2.0538;.021,4.3158,1.1631;-2.458,4.0039,1.1044;-3.8883,3.1127,-.9655;-2.2032,2.7246,-2.9936;.2762,3.0105,-2.9347;2.0968,-5.7698,2.4266;1.7575,-6.3398,.3845;-4.4282,2.9707,-2.0437;-4.4676,3.0569,.1032;6.5495,.1571,-2.1552;5.8707,1.4011,-2.005;7.6792,.0774,-3.0159;8.1025,1.1727,-3.7272;8.1983,-.8812,-3.112;8.9682,1.0986,-4.3913;6.3161,2.5088,-2.7794;7.4014,2.3975,-3.6151;5.7788,3.457,-2.7123;7.7222,3.2615,-4.204;4.5885,3.9156,-.3333;3.7776,5.0656,-.1042;5.9642,3.9835,.0259;6.5099,5.1408,.5273;6.5921,3.0988,-.0944;7.5697,5.1669,.7957;4.3738,6.2526,.4042;5.7119,6.2962,.7066;3.7403,7.1313,.5611;6.1596,7.2132,1.0996;-2.2559,-3.9015,-2.9485;-2.4802,-4.9371,-2.6512;-3.0877,-3.5457,-3.5849;-1.3475,-3.9072,-3.5718;-1.5906,-1.5948,-2.097;-2.299,-1.0838,-2.7731;-1.4284,-.9599,-1.2108;-.63,-1.6495,-2.6328;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662618588947</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004870934442 0.000742465703 0.023679322237 0.005337769349</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056034488 -0.002590855 0.000135947 0.000228738 0.000324303 0.000377959 0.000394948 0.000500187 0.000544122 0.000637754 0.000766525 0.000832330 0.001029786 0.001101792 0.001248237 0.001263473 0.001293177 0.001411499 0.001516346 0.001698450 0.001790306 0.002148166 0.002292072 0.002716110 0.003034147 0.003312413 0.003679309 0.003784335 0.004035808 0.004506211 0.004853369 0.005098523 0.005319493 0.005777224 0.005880344 0.006038757 0.006734830 0.006981033 0.007232868 0.007838492 0.008114976 0.008694358 0.009329789 0.009602381 0.010168384 0.010733223 0.010948026 0.011725817 0.012793213 0.013068472 0.013364866 0.014469634 0.014587693 0.015298595 0.015566859 0.015696205 0.016102316 0.016373395 0.017790476 0.018226343 0.018946673 0.019285757 0.020225429 0.021207434 0.021695705 0.022619737 0.022776356 0.023257982 0.024335352 0.025503049 0.025713042 0.026318503 0.026711189 0.026899109 0.027837687 0.028459382 0.030055778 0.030448884 0.032120813 0.032652761 0.033643041 0.035119092 0.038636600 0.038843731 0.041014681 0.041448737 0.045214141 0.045256799 0.045576405 0.047499437 0.048859708 0.049678533 0.051492897 0.051674161 0.051831923 0.052281356 0.052368207 0.052575640 0.053147582 0.054288187 0.055454162 0.055885040 0.056503836 0.056893570 0.057175620 0.057830535 0.058648577 0.059229447 0.060048655 0.060816967 0.061541357 0.062595260 0.063943932 0.064633936 0.064739688 0.066123032 0.067153666 0.067993486 0.068669662 0.069953592 0.071612715 0.072362561 0.072715423 0.072881058 0.076558965 0.079768265 0.080919175 0.082211853 0.082851260 0.084896561 0.087942469 0.088675700 0.089569674 0.091205325 0.093073729 0.094213864 0.095326325 0.095841262 0.096749029 0.097854109 0.099210213 0.100085754 0.101270840 0.101911407 0.102999736 0.103149717 0.104325325 0.107461283 0.109036235 0.110896162 0.111205102 0.112107928 0.113173882 0.114671105 0.115193994 0.116529698 0.117369128 0.118235594 0.121140322 0.124098519 0.124774480 0.127630442 0.127929489 0.129575065 0.133244034 0.135377999 0.135829598 0.137184052 0.138356801 0.139991398 0.143332238 0.145254159 0.146121147 0.150538701 0.151404768 0.153064430 0.156982019 0.160205811 0.166014867 0.171006614 0.174653682 0.178080305 0.180859206 0.183480205 0.186732699 0.188172048 0.189715320 0.198393509 0.201874175 0.205414482 0.206040679 0.207142510 0.207920959 0.209116995 0.212178279 0.213085348 0.214834098 0.217215243 0.218953023 0.221785897 0.225069557 0.231636652 0.232767487 0.234388535 0.236282743 0.243565073 0.246587265 0.249644707 0.255246661 0.255740489 0.257044669 0.261514853 0.271395309 0.280420014 0.291286277 0.298048017 0.298945265 0.300431239 0.306045844 0.307476354 0.307601281 0.317981394 0.321042605 0.325300801 0.327805775 0.330506848 0.347113655 0.351177486 0.355360934 0.358124799 0.359356238 0.363913030 0.383439557 0.406167267 0.407486212 0.429855572 0.429957707 0.431952097 0.445835873 0.460105671 0.464702056 0.467153499 0.477888310 0.484764107 0.498006610 0.498090334 0.513233267 0.515239320 0.543071045 0.565492827 0.567241497 0.583647871 0.591229891 0.605488031 0.641009629 0.644727256 0.665639565 0.674009482 0.683384470 0.691719732 0.698545010 0.699703806 0.704244736 0.715087343 0.724365805 0.735401905 0.737692010 0.744793250 0.750711442 0.771591276 0.775924906 0.804727733 0.817523747 0.821117418 0.823815680 0.832585478 0.842072534 0.845253566 0.846897109 0.852763180 0.859196920 0.867354423 0.873346504 0.874782162 0.875889316 0.884004678 0.890522765 0.895605034 0.897277351 0.902782859 0.916342339 0.922757411 0.924348502 0.931583231 0.938981697 0.953392974 0.958919947 0.967496489 0.971390544 0.982037022 0.998478780 0.999775572 1.011920922 1.018435267 1.038882667 1.049019050 1.055313001 1.067992118 1.076470664 1.086949900 1.100377907 1.110218948 1.111400789 1.116982947 1.122485759 1.123481768 1.134596945 1.144622505 1.161330737 1.169895421 1.173340947 1.176307389 1.200547504 1.217379815 1.226290457 1.247338802 1.295344677 1.296061809 1.314287283 1.324733565 1.326342708 1.328073953 1.330160788 1.334553785 1.341057270 1.346135657 1.362445358 1.378806062 1.380919033 1.381464140 1.399182651 1.499714278 1.557668827 1.671870612 1.905214665</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">115</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92942265" y3="-0.94817195" z3="-0.69191288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57213688" y3="-1.94864235" z3="-1.62925491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05471092" y3="-0.99567493" z3="-1.48225954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74696088" y3="1.47529348" z3="-1.11583972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29986571" y3="0.3178795" z3="-0.50255936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61901868" y3="2.72684602" z3="-1.09832749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98457782" y3="2.73322871" z3="-0.87422847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38103019" y3="4.99445485" z3="-0.33840315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78697723" y3="3.84419976" z3="-0.80073196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76381841" y3="5.87121775" z3="-0.11878488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02365909" y3="1.59480866" z3="-1.57375244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17940556" y3="0.37514272" z3="0.27507871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72333448" y3="0.36748399" z3="-0.50876325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65919647" y3="0.69628096" z3="0.47166892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65308027" y3="-0.87874739" z3="-1.36335759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1217939" y3="-2.51177791" z3="-1.22914058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.31975606" y3="-5.5002632" z3="-6.13851058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.99590259" y3="-5.07106372" z3="-5.18606133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15486999" y3="-3.94271268" z3="-2.76759723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.97146469" y3="-3.691797" z3="-5.0272484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62592473" y3="-5.9036345" z3="-4.12677672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22116012" y3="-5.33327676" z3="-2.92660397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.55971969" y3="-3.09536825" z3="-3.82433289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.2660449" y3="-3.02014933" z3="-5.83740742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66766067" y3="-6.99105992" z3="-4.22767516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97386486" y3="-5.97196274" z3="-2.07434784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6938057" y3="-3.40149145" z3="-1.54079914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34009671" y3="-3.8864193" z3="-0.84521881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68319701" y3="-4.87884185" z3="-1.14863727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43829085" y3="-3.61284299" z3="0.60518415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.60764488" y3="-3.19961511" z3="3.36846105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.84002638" y3="-4.65320276" z3="1.45294788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13795184" y3="-2.36132037" z3="1.15194936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21970469" y3="-2.15752731" z3="2.52553013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.91661226" y3="-4.44882623" z3="2.82880682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.05399532" y3="-5.64198562" z3="1.03711028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14818857" y3="-1.51788893" z3="0.52234608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02870776" y3="-1.16948798" z3="2.92220039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.19801579" y3="-5.27769834" z3="3.4838064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.66127964" y3="-3.04311301" z3="4.44975835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.53135529" y3="-1.7598065" z3="-3.78570824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.59056924" y3="-1.35897157" z3="-2.87433991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31058428" y3="3.70772401" z3="-0.89271436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07897249" y3="-2.97874237" z3="-1.75927782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9196887" y3="-3.15525967" z3="-0.65706682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13081583" y3="-2.29098617" z3="0.28068304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82052649" y3="-0.70802915" z3="0.53698908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.53657658" y3="-0.14358156" z3="-1.09248806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51460931" y3="0.38265697" z3="1.27512715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18512236" y3="-1.04584117" z3="1.7717377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44597527" y3="-4.35644974" z3="-0.46578572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.23307559" y3="-4.59310941" z3="0.6915903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.77700234" y3="0.25524211" z3="-1.7809758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.26816657" y3="0.66185075" z3="-0.90933795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.06311092" y3="-0.96975137" z3="-1.60918391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59507517" y3="0.49398989" z3="0.67941791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21998716" y3="-0.00048212" z3="2.26860797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.95966982" y3="1.3859757" z3="1.4148863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63700623" y3="-0.09199189" z3="2.09894547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99083979" y3="-1.66642245" z3="1.33941064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.79136612" y3="-1.55748159" z3="2.66783904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.15340493" y3="-3.98715652" z3="0.6663579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.66441978" y3="-4.36727432" z3="1.60649837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.49107635" y3="-5.65974594" z3="0.65718781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31648704" y3="-2.18293187" z3="-0.13621452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15887459" y3="-3.30102448" z3="-0.96776234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50664472" y3="-4.44307233" z3="-0.51831192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01086615" y3="-4.46017512" z3="0.77951896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18656852" y3="-3.38581515" z3="1.64677943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.83683542" y3="-2.24986807" z3="1.18211645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50272827" y3="-3.25835193" z3="-2.0045418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34960894" y3="-5.29657656" z3="-1.17814073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.23969101" y3="-5.61890696" z3="1.23428674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78710467" y3="-3.4384781" z3="2.66040735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.95095486" y3="-1.39136183" z3="1.84486997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47017019" y3="3.99278721" z3="0.23424814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84731386" y3="3.81055222" z3="0.21599708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4410218" y3="3.3489658" z3="-0.95289535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6981712" y3="3.08103622" z3="-2.10022881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31993589" y3="3.25130755" z3="-2.0588967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01695201" y3="4.32225647" z3="1.15340926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45721722" y3="4.00362323" z3="1.10057587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88554513" y3="3.11102546" z3="-0.97164047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.20283245" y3="2.73405118" z3="-3.00444597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.27742947" y3="3.01732952" z3="-2.94299088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.10384449" y3="-5.7789119" z3="2.42629749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76272325" y3="-6.34859936" z3="0.38450345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41954821" y3="2.96099638" z3="-2.04665397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46732208" y3="3.05572772" z3="0.09537258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54938144" y3="0.15468243" z3="-2.14962197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87195793" y3="1.39954635" z3="-2.00016634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68102871" y3="0.07395959" z3="-3.00764368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1074773" y3="1.16901565" z3="-3.71737073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19898789" y3="-0.88533009" z3="-3.10316501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.97455594" y3="1.09410176" z3="-4.37962073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32076678" y3="2.50711901" z3="-2.77281863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.40782051" y3="2.39478538" z3="-3.606144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7846086" y3="3.45606576" z3="-2.70620718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.73103239" y3="3.25862525" z3="-4.1939587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58877189" y3="3.91482754" z3="-0.3304833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77870043" y3="5.06577871" z3="-0.10316067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96356526" y3="3.98070756" z3="0.03267003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50935994" y3="5.13699282" z3="0.53615562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.59050004" y3="3.09505418" z3="-0.08602684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5684367" y3="5.16150574" z3="0.80780978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37518032" y3="6.25190009" z3="0.4069348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71262447" y3="6.29350819" z3="0.71322924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74278907" y3="7.13139975" z3="0.56150785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16051613" y3="7.2097987" z3="1.10768586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.26011635" y3="-3.90409076" z3="-2.94583777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48279478" y3="-4.93949908" z3="-2.64529904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.0932039" y3="-3.55116002" z3="-3.58332163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.35224451" y3="-3.91023267" z3="-3.56998384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.59737825" y3="-1.59451595" z3="-2.09910095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.30649512" y3="-1.08644635" z3="-2.77834401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.43554575" y3="-0.95840791" z3="-1.21478044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.63712034" y3="-1.64923892" z3="-2.63535194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9294,-.9482,-.6919;6.5721,-1.9486,-1.6293;6.0547,-.9957,-1.4823;4.747,1.4753,-1.1158;4.2999,.3179,-.5026;2.619,2.7268,-1.0983;3.9846,2.7332,-.8742;2.381,4.9945,-.3384;1.787,3.8442,-.8007;1.7638,5.8712,-.1188;2.0237,1.5948,-1.5738;3.1794,.3751,.2751;1.7233,.3675,-.5088;.6592,.6963,.4717;1.6531,-.8787,-1.3634;1.1218,-2.5118,-1.2291;2.3198,-5.5003,-6.1385;1.9959,-5.0711,-5.1861;1.1549,-3.9427,-2.7676;1.9715,-3.6918,-5.0272;1.6259,-5.9036,-4.1268;1.2212,-5.3333,-2.9266;1.5597,-3.0954,-3.8243;2.266,-3.0201,-5.8374;1.6677,-6.9911,-4.2277;.9739,-5.972,-2.0743;.6938,-3.4015,-1.5408;-.3401,-3.8864,-.8452;-.6832,-4.8788,-1.1486;-.4383,-3.6128,.6052;-.6076,-3.1996,3.3685;-.84,-4.6532,1.4529;-.138,-2.3613,1.1519;-.2197,-2.1575,2.5255;-.9166,-4.4488,2.8288;-1.054,-5.642,1.0371;.1482,-1.5179,.5223;.0287,-1.1695,2.9222;-1.198,-5.2777,3.4838;-.6613,-3.0431,4.4498;1.5314,-1.7598,-3.7857;1.5906,-1.359,-2.8743;.3106,3.7077,-.8927;-2.079,-2.9787,-1.7593;-2.9197,-3.1553,-.6571;-3.1308,-2.291,.2807;-3.8205,-.708,.537;-4.5366,-.1436,-1.0925;-2.5146,.3827,1.2751;-5.1851,-1.0458,1.7717;-3.446,-4.3564,-.4658;-4.2331,-4.5931,.6916;-3.777,.2552,-1.781;-5.2682,.6619,-.9093;-5.0631,-.9698,-1.6092;-1.5951,.494,.6794;-2.22,-.0005,2.2686;-2.9597,1.386,1.4149;-5.637,-.092,2.0989;-5.9908,-1.6664,1.3394;-4.7914,-1.5575,2.6678;-5.1534,-3.9872,.6664;-3.6644,-4.3673,1.6065;-4.4911,-5.6597,.6572;4.3165,-2.1829,-.1362;4.1589,-3.301,-.9678;3.5066,-4.4431,-.5183;3.0109,-4.4602,.7795;3.1866,-3.3858,1.6468;3.8368,-2.2499,1.1821;4.5027,-3.2584,-2.0045;3.3496,-5.2966,-1.1781;2.2397,-5.6189,1.2343;2.7871,-3.4385,2.6604;3.951,-1.3914,1.8449;-.4702,3.9928,.2342;-1.8473,3.8106,.216;-2.441,3.349,-.9529;-1.6982,3.081,-2.1002;-.3199,3.2513,-2.0589;.017,4.3223,1.1534;-2.4572,4.0036,1.1006;-3.8855,3.111,-.9716;-2.2028,2.7341,-3.0044;.2774,3.0173,-2.943;2.1038,-5.7789,2.4263;1.7627,-6.3486,.3845;-4.4195,2.961,-2.0467;-4.4673,3.0557,.0954;6.5494,.1547,-2.1496;5.872,1.3995,-2.0002;7.681,.074,-3.0076;8.1075,1.169,-3.7174;8.199,-.8853,-3.1032;8.9746,1.0941,-4.3796;6.3208,2.5071,-2.7728;7.4078,2.3948,-3.6061;5.7846,3.4561,-2.7062;7.731,3.2586,-4.194;4.5888,3.9148,-.3305;3.7787,5.0658,-.1032;5.9636,3.9807,.0327;6.5094,5.137,.5362;6.5905,3.0951,-.086;7.5684,5.1615,.8078;4.3752,6.2519,.4069;5.7126,6.2935,.7132;3.7428,7.1314,.5615;6.1605,7.2098,1.1077;-2.2601,-3.9041,-2.9458;-2.4828,-4.9395,-2.6453;-3.0932,-3.5512,-3.5833;-1.3522,-3.9102,-3.57;-1.5974,-1.5945,-2.0991;-2.3065,-1.0864,-2.7783;-1.4355,-.9584,-1.2148;-.6371,-1.6492,-2.6354;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662632640982</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004963539694 0.000783292766 0.023694920338 0.005336548288</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056166235 -0.003019935 0.000137147 0.000234055 0.000324628 0.000378239 0.000396987 0.000499794 0.000544406 0.000638760 0.000766614 0.000835779 0.001033172 0.001101992 0.001250720 0.001263497 0.001294676 0.001411394 0.001516289 0.001698635 0.001790134 0.002151682 0.002293631 0.002716206 0.003035533 0.003312811 0.003679181 0.003784130 0.004047967 0.004507258 0.004854140 0.005101376 0.005320440 0.005782955 0.005883310 0.006055641 0.006733287 0.006981990 0.007236344 0.007839073 0.008124533 0.008700789 0.009331846 0.009611414 0.010168436 0.010747741 0.010958926 0.011725920 0.012795051 0.013072530 0.013409900 0.014470045 0.014589290 0.015317181 0.015583453 0.015696754 0.016129480 0.016380213 0.017794206 0.018232320 0.019066844 0.019331833 0.020233889 0.021268187 0.021731054 0.022632711 0.022788965 0.023258497 0.024343838 0.025503257 0.025726050 0.026333796 0.026715240 0.026907222 0.027837976 0.028459648 0.030056397 0.030448969 0.032121972 0.032652891 0.033641132 0.035130644 0.038638505 0.038845281 0.041014697 0.041476701 0.045214305 0.045260316 0.045576051 0.047495556 0.048869490 0.049678575 0.051493655 0.051677474 0.051832016 0.052281414 0.052368184 0.052575561 0.053152209 0.054287744 0.055630792 0.055890078 0.056503958 0.056894513 0.057175965 0.057831296 0.058648591 0.059229379 0.060090061 0.060817624 0.061548689 0.062602021 0.063960262 0.064654825 0.064801527 0.066124321 0.067240799 0.067993519 0.068669543 0.070223549 0.071613808 0.072367830 0.072812580 0.073160099 0.076561444 0.079822267 0.080926080 0.082325145 0.082857320 0.085096986 0.087942410 0.088727804 0.089575617 0.091207755 0.093083172 0.094233436 0.095329032 0.095844270 0.096749416 0.097860771 0.099286117 0.100098320 0.101272636 0.101911435 0.103037368 0.103196354 0.104328283 0.107515021 0.109195105 0.110945456 0.111220068 0.112148752 0.113220040 0.114739401 0.115249798 0.116529781 0.117369072 0.118273542 0.121256578 0.124149788 0.124817486 0.127632988 0.127943525 0.129619963 0.133287915 0.135555778 0.136101850 0.137284749 0.138357598 0.140002275 0.143334581 0.145263459 0.146123103 0.150653709 0.151436172 0.153084477 0.157606061 0.160233538 0.166046399 0.171008330 0.174653792 0.178080747 0.180859344 0.183508054 0.186734615 0.188171837 0.189719188 0.198397464 0.201874310 0.205414443 0.206083358 0.207148584 0.208728361 0.209147808 0.212200860 0.213086400 0.214989836 0.217340575 0.218981867 0.221785283 0.225082725 0.231643785 0.232767609 0.234390518 0.236282613 0.243661343 0.246787344 0.249647863 0.255249916 0.255768026 0.257051084 0.261633593 0.271396996 0.280419998 0.291287322 0.298054530 0.298945450 0.300462282 0.306133944 0.307477951 0.307604157 0.317983998 0.321042573 0.325305525 0.327806680 0.330509893 0.347114872 0.351178095 0.355361079 0.358149168 0.359356814 0.363913029 0.383439721 0.406167160 0.407629925 0.429855859 0.429960239 0.431966081 0.445842361 0.460302704 0.464702889 0.467307389 0.477888315 0.484803995 0.498042359 0.498273161 0.513301245 0.515270964 0.543071103 0.565493112 0.567243364 0.583648483 0.591268602 0.605490049 0.641050359 0.644767414 0.665639557 0.674139435 0.683423463 0.691720592 0.698773545 0.699833001 0.704244968 0.715196554 0.724459609 0.735410121 0.737696986 0.744932870 0.750711584 0.771591355 0.775925860 0.804741765 0.817540311 0.821156057 0.823901933 0.832674419 0.842125741 0.845268290 0.846897090 0.852796288 0.859222996 0.867355808 0.873366246 0.875038515 0.876350085 0.884005444 0.890644713 0.895697351 0.897860619 0.904086240 0.916387486 0.922758052 0.924350914 0.931583123 0.938994590 0.954019955 0.959019806 0.967838151 0.972010215 0.982053514 0.998488824 1.000676779 1.011931396 1.018458607 1.038886691 1.049025368 1.055313498 1.068079807 1.076479923 1.086958021 1.100611274 1.110219000 1.111405039 1.117015826 1.122486014 1.123481919 1.134602878 1.144637325 1.161332547 1.169897266 1.173355855 1.176316284 1.200547613 1.217425001 1.226426414 1.247338992 1.295345575 1.296063295 1.314287330 1.324816688 1.326342781 1.328076700 1.330160912 1.334555187 1.341057247 1.346136326 1.362446252 1.378806215 1.380919285 1.381464422 1.399222939 1.501042054 1.557673718 1.671870586 1.906313674</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">116</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92418576" y3="-0.94882717" z3="-0.69121317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56838477" y3="-1.95067368" z3="-1.6242662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05142862" y3="-0.99725819" z3="-1.4786616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74519329" y3="1.4750446" z3="-1.11511934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29537738" y3="0.31779962" z3="-0.50341942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6185381" y3="2.73011585" z3="-1.10214896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98364542" y3="2.73399129" z3="-0.87443883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38203683" y3="4.99743441" z3="-0.33977963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78772382" y3="3.84884451" z3="-0.80604864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76543106" y3="5.87472804" z3="-0.11976648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02256626" y3="1.59924898" z3="-1.5797914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.17282998" y3="0.37597188" z3="0.27122598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71920241" y3="0.37051606" z3="-0.51696968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.65227225" y3="0.69869457" z3="0.4607003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6511831" y3="-0.87455764" z3="-1.37324748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11908657" y3="-2.50677191" z3="-1.23514774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.31443189" y3="-5.49952162" z3="-6.14237118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.99106169" y3="-5.06965034" z3="-5.19002605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.15191527" y3="-3.9397026" z3="-2.77155455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.96313458" y3="-3.69021193" z3="-5.03341452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62535633" y3="-5.90146837" z3="-4.12867598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22139118" y3="-5.33030892" z3="-2.92857204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.55238092" y3="-3.09318085" z3="-3.83058562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.25437651" y3="-3.01897768" z3="-5.84511313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66980063" y3="-6.98892666" z3="-4.22795951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97714732" y3="-5.9682867" z3="-2.07486312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69207358" y3="-3.39760171" z3="-1.54483324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34151743" y3="-3.88262726" z3="-0.84735188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68199769" y3="-4.87674778" z3="-1.14832626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43551929" y3="-3.60850983" z3="0.60352177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.59503336" y3="-3.19442122" z3="3.36735339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.82840075" y3="-4.65028408" z3="1.45363558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13909655" y3="-2.35498595" z3="1.14821288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21590482" y3="-2.15079666" z3="2.52203874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.900035" y3="-4.44555425" z3="2.82980929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.03885794" y3="-5.64051635" z3="1.03944079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.14044046" y3="-1.510449" z3="0.51699447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.02976019" y3="-1.16138441" z3="2.91709661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.17432087" y3="-5.27555531" z3="3.48655978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.64478054" y3="-3.03763869" z3="4.44880058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.52099482" y3="-1.75765265" z3="-3.79453477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.58270451" y3="-1.35485361" z3="-2.88289758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31127551" y3="3.71442246" z3="-0.90077895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.07986398" y3="-2.98088942" z3="-1.75909329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91964823" y3="-3.15620803" z3="-0.65465317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13131652" y3="-2.28972719" z3="0.28077272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82372216" y3="-0.70843337" z3="0.53849265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.54546229" y3="-0.14968922" z3="-1.08971814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52016762" y3="0.38452455" z3="1.27139973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18458705" y3="-1.04802115" z3="1.77697543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.44218423" y3="-4.35835002" z3="-0.4596535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.22354464" y3="-4.59564217" z3="0.70159181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.78432395" y3="0.24815524" z3="-1.78224822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27797752" y3="0.65986041" z3="-0.90780967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.07864969" y3="-0.97181574" z3="-1.59429005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59015865" y3="0.49996796" z3="0.67673302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2223396" y3="0.00160956" z3="2.26357047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96122133" y3="1.38743389" z3="1.41324524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63676043" y3="-0.09399095" z3="2.10363555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98925222" y3="-1.67074331" z3="1.35133041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.78733322" y3="-1.55838231" z3="2.67247445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.14482396" y3="-3.99077447" z3="0.68055825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.65033684" y3="-4.36799471" z3="1.61371529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.47981638" y3="-5.66308924" z3="0.6690835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.31015209" y3="-2.18361594" z3="-0.13657825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15481868" y3="-3.3018779" z3="-0.96845995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50495462" y3="-4.44535156" z3="-0.51941719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00944988" y3="-4.46391891" z3="0.77849173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.18180726" y3="-3.38901385" z3="1.64571975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82931339" y3="-2.25136528" z3="1.18127895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49911755" y3="-3.25846639" z3="-2.00506661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34990745" y3="-5.29899385" z3="-1.17950396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24277991" y3="-5.62538639" z3="1.23347526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.78216744" y3="-3.44269118" z3="2.65924423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.94107681" y3="-1.39261877" z3="1.84411644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46987277" y3="3.99529067" z3="0.22909185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84560626" y3="3.80848995" z3="0.21140996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43797886" y3="3.34722847" z3="-0.95934115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69487487" y3="3.08324077" z3="-2.1075269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31810389" y3="3.25967565" z3="-2.06826272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01890868" y3="4.32070619" z3="1.15200805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45810061" y3="4.00180487" z3="1.09123582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88353117" y3="3.10956697" z3="-0.98027745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.1952952" y3="2.7325325" z3="-3.00909458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28112676" y3="3.02661497" z3="-2.94949108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1109664" y3="-5.78797798" z3="2.42564014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76529007" y3="-6.35469628" z3="0.38376301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42222654" y3="2.96362914" z3="-2.05896096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46397144" y3="3.05447033" z3="0.08829523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54898569" y3="0.15276682" z3="-2.1444634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87263867" y3="1.39835509" z3="-1.99632248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68283035" y3="0.07099033" z3="-2.99930338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11271919" y3="1.16589766" z3="-3.70707366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19971956" y3="-0.88895303" z3="-3.09390429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.98144853" y3="1.09020777" z3="-4.36686901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3253012" y3="2.5058179" z3="-2.76677954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.41454152" y3="2.39256764" z3="-3.5968741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79048885" y3="3.45553921" z3="-2.70085374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.74066439" y3="3.25643648" z3="-4.18289837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.588284" y3="3.91418904" z3="-0.32784699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77917658" y3="5.06619302" z3="-0.10087916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96262898" y3="3.97772263" z3="0.03838182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50904957" y3="5.13279941" z3="0.54422339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58889969" y3="3.09133002" z3="-0.08011818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56787033" y3="5.15551137" z3="0.81799332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37611992" y3="6.25095617" z3="0.41195949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71321551" y3="6.29034111" z3="0.72107828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74426812" y3="7.13132295" z3="0.56642027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16157397" y3="7.2057094" z3="1.11729875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.26278135" y3="-3.90859997" z3="-2.9437029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48315366" y3="-4.94375117" z3="-2.64101356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.09760305" y3="-3.55801314" z3="-3.57980099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.35613367" y3="-3.91420609" z3="-3.56946247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6035153" y3="-1.59554569" z3="-2.1029804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.31448088" y3="-1.0911734" z3="-2.78100733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.44409341" y3="-0.95553247" z3="-1.21971844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.64265162" y3="-1.64819829" z3="-2.63893757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9242,-.9488,-.6912;6.5684,-1.9507,-1.6243;6.0514,-.9973,-1.4787;4.7452,1.475,-1.1151;4.2954,.3178,-.5034;2.6185,2.7301,-1.1021;3.9836,2.734,-.8744;2.382,4.9974,-.3398;1.7877,3.8488,-.806;1.7654,5.8747,-.1198;2.0226,1.5992,-1.5798;3.1728,.376,.2712;1.7192,.3705,-.517;.6523,.6987,.4607;1.6512,-.8746,-1.3732;1.1191,-2.5068,-1.2351;2.3144,-5.4995,-6.1424;1.9911,-5.0697,-5.19;1.1519,-3.9397,-2.7716;1.9631,-3.6902,-5.0334;1.6254,-5.9015,-4.1287;1.2214,-5.3303,-2.9286;1.5524,-3.0932,-3.8306;2.2544,-3.019,-5.8451;1.6698,-6.9889,-4.228;.9771,-5.9683,-2.0749;.6921,-3.3976,-1.5448;-.3415,-3.8826,-.8474;-.682,-4.8767,-1.1483;-.4355,-3.6085,.6035;-.595,-3.1944,3.3674;-.8284,-4.6503,1.4536;-.1391,-2.355,1.1482;-.2159,-2.1508,2.522;-.9,-4.4456,2.8298;-1.0389,-5.6405,1.0394;.1404,-1.5104,.517;.0298,-1.1614,2.9171;-1.1743,-5.2756,3.4866;-.6448,-3.0376,4.4488;1.521,-1.7577,-3.7945;1.5827,-1.3549,-2.8829;.3113,3.7144,-.9008;-2.0799,-2.9809,-1.7591;-2.9196,-3.1562,-.6547;-3.1313,-2.2897,.2808;-3.8237,-.7084,.5385;-4.5455,-.1497,-1.0897;-2.5202,.3845,1.2714;-5.1846,-1.048,1.777;-3.4422,-4.3584,-.4597;-4.2235,-4.5956,.7016;-3.7843,.2482,-1.7822;-5.278,.6599,-.9078;-5.0786,-.9718,-1.5943;-1.5902,.5,.6767;-2.2223,.0016,2.2636;-2.9612,1.3874,1.4132;-5.6368,-.094,2.1036;-5.9893,-1.6707,1.3513;-4.7873,-1.5584,2.6725;-5.1448,-3.9908,.6806;-3.6503,-4.368,1.6137;-4.4798,-5.6631,.6691;4.3102,-2.1836,-.1366;4.1548,-3.3019,-.9685;3.505,-4.4454,-.5194;3.0094,-4.4639,.7785;3.1818,-3.389,1.6457;3.8293,-2.2514,1.1813;4.4991,-3.2585,-2.0051;3.3499,-5.299,-1.1795;2.2428,-5.6254,1.2335;2.7822,-3.4427,2.6592;3.9411,-1.3926,1.8441;-.4699,3.9953,.2291;-1.8456,3.8085,.2114;-2.438,3.3472,-.9593;-1.6949,3.0832,-2.1075;-.3181,3.2597,-2.0683;.0189,4.3207,1.152;-2.4581,4.0018,1.0912;-3.8835,3.1096,-.9803;-2.1953,2.7325,-3.0091;.2811,3.0266,-2.9495;2.111,-5.788,2.4256;1.7653,-6.3547,.3838;-4.4222,2.9636,-2.059;-4.464,3.0545,.0883;6.549,.1528,-2.1445;5.8726,1.3984,-1.9963;7.6828,.071,-2.9993;8.1127,1.1659,-3.7071;8.1997,-.889,-3.0939;8.9814,1.0902,-4.3669;6.3253,2.5058,-2.7668;7.4145,2.3926,-3.5969;5.7905,3.4555,-2.7009;7.7407,3.2564,-4.1829;4.5883,3.9142,-.3278;3.7792,5.0662,-.1009;5.9626,3.9777,.0384;6.509,5.1328,.5442;6.5889,3.0913,-.0801;7.5679,5.1555,.818;4.3761,6.251,.412;5.7132,6.2903,.7211;3.7443,7.1313,.5664;6.1616,7.2057,1.1173;-2.2628,-3.9086,-2.9437;-2.4832,-4.9438,-2.641;-3.0976,-3.558,-3.5798;-1.3561,-3.9142,-3.5695;-1.6035,-1.5955,-2.103;-2.3145,-1.0912,-2.781;-1.4441,-.9555,-1.2197;-.6427,-1.6482,-2.6389;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662648542240</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006592107439 0.000832031818 0.023889846715 0.005338103275</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056284876 -0.003100321 0.000137981 0.000243006 0.000325198 0.000386105 0.000398066 0.000499735 0.000545778 0.000641297 0.000766656 0.000836279 0.001038772 0.001101987 0.001250697 0.001264372 0.001294470 0.001411415 0.001517916 0.001698909 0.001790076 0.002152304 0.002297910 0.002717675 0.003038178 0.003319457 0.003680532 0.003785524 0.004051280 0.004513071 0.004861083 0.005101949 0.005324205 0.005785605 0.005884270 0.006057494 0.006743583 0.006982778 0.007254022 0.007844890 0.008125004 0.008700611 0.009332476 0.009610712 0.010173458 0.010746578 0.010963562 0.011728316 0.012815982 0.013072754 0.013450956 0.014470486 0.014591704 0.015330883 0.015594474 0.015696873 0.016167922 0.016385792 0.017802222 0.018234456 0.019114258 0.019369551 0.020240675 0.021346442 0.021786209 0.022640839 0.022791638 0.023261066 0.024356136 0.025519212 0.025745479 0.026356853 0.026719067 0.026928167 0.027844266 0.028459629 0.030056643 0.030449130 0.032123630 0.032653174 0.033656350 0.035152587 0.038640047 0.038845362 0.041014786 0.041484365 0.045214537 0.045262458 0.045580475 0.047541568 0.048868924 0.049678633 0.051493666 0.051678024 0.051831994 0.052281593 0.052368395 0.052576480 0.053172149 0.054305830 0.055736592 0.055894574 0.056504147 0.056896193 0.057176500 0.057836546 0.058648729 0.059229274 0.060161127 0.060817577 0.061558868 0.062602073 0.063966541 0.064657863 0.064839776 0.066127655 0.067280628 0.067993988 0.068670287 0.070536860 0.071615153 0.072369884 0.072824670 0.073531177 0.076565173 0.079866585 0.080941859 0.082406740 0.082868403 0.085358156 0.087954174 0.088826141 0.089591981 0.091207349 0.093083441 0.094262471 0.095330407 0.095848233 0.096754151 0.097864286 0.099412156 0.100098719 0.101274741 0.101911428 0.103047072 0.103262379 0.104332602 0.107548193 0.109375824 0.111010972 0.111240980 0.112198260 0.113280923 0.114827554 0.115367414 0.116530942 0.117369129 0.118288979 0.121393575 0.124202824 0.124847393 0.127633830 0.127959461 0.129673309 0.133323007 0.135605040 0.136592492 0.137664498 0.138357944 0.140073138 0.143334457 0.145283736 0.146125866 0.150674851 0.151464102 0.153103493 0.158213083 0.160245241 0.166092737 0.171012966 0.174654053 0.178083926 0.180861010 0.183561360 0.186739246 0.188171877 0.189725383 0.198401923 0.201874277 0.205414335 0.206084530 0.207149040 0.208998578 0.209279811 0.212228538 0.213090671 0.215286875 0.217402855 0.218984747 0.221787344 0.225094489 0.231645230 0.232767599 0.234390578 0.236282645 0.243685631 0.246891318 0.249647926 0.255251053 0.255778275 0.257062735 0.261780530 0.271396971 0.280419991 0.291292176 0.298058769 0.298946060 0.300498030 0.306223973 0.307478735 0.307604854 0.317984103 0.321042652 0.325308335 0.327806738 0.330510583 0.347115766 0.351178203 0.355361318 0.358148251 0.359356988 0.363913059 0.383441580 0.406169208 0.407842185 0.429869740 0.429988672 0.431966698 0.445842286 0.460454424 0.464703152 0.467432431 0.477888314 0.484878842 0.498045017 0.498455242 0.513382293 0.515308564 0.543071166 0.565493465 0.567244067 0.583650636 0.591362609 0.605504446 0.641084009 0.644815165 0.665639765 0.674335690 0.683422567 0.691722786 0.698874304 0.699994226 0.704244983 0.715375591 0.724532467 0.735428957 0.737720346 0.745013929 0.750711889 0.771591527 0.775927595 0.804757103 0.817549192 0.821198329 0.823900308 0.832769773 0.842125134 0.845277112 0.846899936 0.852803647 0.859238946 0.867356609 0.873380871 0.875174071 0.877072992 0.884006489 0.890769608 0.895731985 0.898504518 0.906575875 0.916502556 0.922762379 0.924356889 0.931588032 0.938999669 0.954262290 0.959068337 0.968322856 0.972974087 0.982073274 0.998489939 1.001217939 1.011931439 1.018478611 1.038890740 1.049026610 1.055313841 1.068191821 1.076488350 1.086969443 1.100931350 1.110219002 1.111405650 1.117020795 1.122487572 1.123484139 1.134603818 1.144640156 1.161332723 1.169899889 1.173359252 1.176322451 1.200547799 1.217429591 1.226511055 1.247339385 1.295347085 1.296064854 1.314287397 1.324998743 1.326343306 1.328078890 1.330161006 1.334555184 1.341057253 1.346136251 1.362446635 1.378806670 1.380920060 1.381469951 1.399222754 1.502970645 1.557676564 1.671872494 1.907582029</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">117</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91941427" y3="-0.94929974" z3="-0.69089372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56495878" y3="-1.95234111" z3="-1.62030061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04855696" y3="-0.99848529" z3="-1.47560255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74455422" y3="1.47491935" z3="-1.11315942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2914038" y3="0.31775572" z3="-0.50374038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62009814" y3="2.73214052" z3="-1.10456686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98439976" y3="2.73461713" z3="-0.87360103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3835476" y3="4.9986059" z3="-0.34088967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78912464" y3="3.8506016" z3="-0.80817376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76729407" y3="5.8759852" z3="-0.12206273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02457358" y3="1.60241676" z3="-1.58524753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16678474" y3="0.37631103" z3="0.26787084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71513121" y3="0.3742423" z3="-0.52433265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64636448" y3="0.70456479" z3="0.45051516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64638116" y3="-0.87039776" z3="-1.38145819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1175716" y3="-2.50267393" z3="-1.2405659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.30703909" y3="-5.499845" z3="-6.14689077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.98510537" y3="-5.06924372" z3="-5.19446173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14942533" y3="-3.93712048" z3="-2.77586667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.95518991" y3="-3.68973566" z3="-5.03986717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.62334422" y3="-5.90015933" z3="-4.13101779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.22087921" y3="-5.32785465" z3="-2.9310243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.5466" y3="-3.09140764" z3="-3.83690892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.24318322" y3="-3.01913509" z3="-5.85324157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66970654" y3="-6.98767228" z3="-4.22865406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97945468" y3="-5.96503164" z3="-2.07591819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69094503" y3="-3.39441385" z3="-1.54868727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33855722" y3="-3.88117199" z3="-0.84792514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67990081" y3="-4.87530131" z3="-1.14764527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.43094223" y3="-3.60481578" z3="0.60243502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.58136136" y3="-3.18849473" z3="3.36636532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.81600915" y3="-4.6473695" z3="1.4550784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13867344" y3="-2.34932346" z3="1.14458733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.21098188" y3="-2.14391186" z3="2.51844905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.88279252" y3="-4.44154341" z3="2.83132849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.02365427" y3="-5.63882922" z3="1.04269512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.13409035" y3="-1.50411775" z3="0.51129664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03134888" y3="-1.15271071" z3="2.91145577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.15043102" y3="-5.27211957" z3="3.48985104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.62720048" y3="-3.03079893" z3="4.44786552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.51416886" y3="-1.75595885" z3="-3.80333036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.57217429" y3="-1.35154328" z3="-2.89094995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31307438" y3="3.71481332" z3="-0.90382607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.08452219" y3="-2.98152813" z3="-1.75782098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91910766" y3="-3.15783271" z3="-0.65062837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13028859" y3="-2.29132747" z3="0.28503282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82528023" y3="-0.70982171" z3="0.54092476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.55278768" y3="-0.15035148" z3="-1.0850835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51985526" y3="0.3864982" z3="1.26883352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1822026" y3="-1.04985825" z3="1.78399403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43809047" y3="-4.36118499" z3="-0.45207303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.21456194" y3="-4.5979374" z3="0.71243063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.79785927" y3="0.23843687" z3="-1.78382928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27716206" y3="0.6612894" z3="-0.89999797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.09027157" y3="-0.97666498" z3="-1.59203436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60150221" y3="0.50023684" z3="0.66881414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21776681" y3="0.00899063" z3="2.2600553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96677381" y3="1.38918012" z3="1.40816169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63603288" y3="-0.09649042" z3="2.110457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98921266" y3="-1.67404167" z3="1.3559603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.78199258" y3="-1.55918652" z3="2.67855858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.13773189" y3="-3.99526242" z3="0.69309456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.63922934" y3="-4.36741925" z3="1.62255354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.46823423" y3="-5.66611169" z3="0.68245552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.30421184" y3="-2.18405899" z3="-0.13771066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15086668" y3="-3.30214696" z3="-0.97012845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50308384" y3="-4.44694881" z3="-0.52161119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00794189" y3="-4.46714487" z3="0.77639302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17755457" y3="-3.39208168" z3="1.64389825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.82246729" y3="-2.25281079" z3="1.1797589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49570368" y3="-3.25782349" z3="-2.00649603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34996284" y3="-5.30071388" z3="-1.18198858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24463472" y3="-5.63074545" z3="1.23105639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77791221" y3="-3.44693745" z3="2.65737959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.93213815" y3="-1.39388161" z3="1.84275536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.46936931" y3="3.99574995" z3="0.22265349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84627503" y3="3.81086577" z3="0.20201552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43821573" y3="3.35076311" z3="-0.96922469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69322224" y3="3.08678022" z3="-2.11539902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3152458" y3="3.26065673" z3="-2.07224769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.0168696" y3="4.3225438" z3="1.14411198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45778722" y3="4.00059138" z3="1.08609686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88257935" y3="3.10936694" z3="-0.98998367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19662615" y3="2.74027602" z3="-3.02087781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28389532" y3="3.03037946" z3="-2.95558522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.11855454" y3="-5.79761121" z3="2.423263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7636433" y3="-6.3573221" z3="0.38095371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41523978" y3="2.95501687" z3="-2.06501806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46546737" y3="3.05632784" z3="0.07625474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54913064" y3="0.15129481" z3="-2.13934846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87398708" y3="1.39758246" z3="-1.99180642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68506394" y3="0.06871764" z3="-2.99140624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11821486" y3="1.16365899" z3="-3.69714888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20094673" y3="-0.89182881" z3="-3.08537226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.98866082" y3="1.08742374" z3="-4.35466666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32990292" y3="2.50507804" z3="-2.7604791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.42121824" y3="2.39108958" z3="-3.58792616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79601441" y3="3.45535787" z3="-2.6955477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75006307" y3="3.25501483" z3="-4.17243981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58878151" y3="3.91369467" z3="-0.3247271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78044239" y3="5.06613491" z3="-0.09917429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96182543" y3="3.97535355" z3="0.04547294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50792284" y3="5.12911794" z3="0.55436649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58709734" y3="3.08841836" z3="-0.07207277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56550591" y3="5.15039598" z3="0.83156813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37730494" y3="6.24956167" z3="0.41671496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71307504" y3="6.28711683" z3="0.73015759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74606341" y3="7.13021713" z3="0.57079484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16109291" y3="7.20134659" z3="1.12918029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.26683308" y3="-3.91152306" z3="-2.94032045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48573747" y3="-4.94624382" z3="-2.63630416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.10263824" y3="-3.56269436" z3="-3.57557515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.36102352" y3="-3.91707889" z3="-3.56753287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.61039342" y3="-1.59631292" z3="-2.10515924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.32260972" y3="-1.0950508" z3="-2.78597106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.45064724" y3="-0.95518757" z3="-1.22443501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.65009899" y3="-1.64883877" z3="-2.6420428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9194,-.9493,-.6909;6.565,-1.9523,-1.6203;6.0486,-.9985,-1.4756;4.7446,1.4749,-1.1132;4.2914,.3178,-.5037;2.6201,2.7321,-1.1046;3.9844,2.7346,-.8736;2.3835,4.9986,-.3409;1.7891,3.8506,-.8082;1.7673,5.876,-.1221;2.0246,1.6024,-1.5852;3.1668,.3763,.2679;1.7151,.3742,-.5243;.6464,.7046,.4505;1.6464,-.8704,-1.3815;1.1176,-2.5027,-1.2406;2.307,-5.4998,-6.1469;1.9851,-5.0692,-5.1945;1.1494,-3.9371,-2.7759;1.9552,-3.6897,-5.0399;1.6233,-5.9002,-4.131;1.2209,-5.3279,-2.931;1.5466,-3.0914,-3.8369;2.2432,-3.0191,-5.8532;1.6697,-6.9877,-4.2287;.9795,-5.965,-2.0759;.6909,-3.3944,-1.5487;-.3386,-3.8812,-.8479;-.6799,-4.8753,-1.1476;-.4309,-3.6048,.6024;-.5814,-3.1885,3.3664;-.816,-4.6474,1.4551;-.1387,-2.3493,1.1446;-.211,-2.1439,2.5184;-.8828,-4.4415,2.8313;-1.0237,-5.6388,1.0427;.1341,-1.5041,.5113;.0313,-1.1527,2.9115;-1.1504,-5.2721,3.4899;-.6272,-3.0308,4.4479;1.5142,-1.756,-3.8033;1.5722,-1.3515,-2.8909;.3131,3.7148,-.9038;-2.0845,-2.9815,-1.7578;-2.9191,-3.1578,-.6506;-3.1303,-2.2913,.285;-3.8253,-.7098,.5409;-4.5528,-.1504,-1.0851;-2.5199,.3865,1.2688;-5.1822,-1.0499,1.784;-3.4381,-4.3612,-.4521;-4.2146,-4.5979,.7124;-3.7979,.2384,-1.7838;-5.2772,.6613,-.9;-5.0903,-.9767,-1.592;-1.6015,.5002,.6688;-2.2178,.009,2.2601;-2.9668,1.3892,1.4082;-5.636,-.0965,2.1105;-5.9892,-1.674,1.356;-4.782,-1.5592,2.6786;-5.1377,-3.9953,.6931;-3.6392,-4.3674,1.6226;-4.4682,-5.6661,.6825;4.3042,-2.1841,-.1377;4.1509,-3.3021,-.9701;3.5031,-4.4469,-.5216;3.0079,-4.4671,.7764;3.1776,-3.3921,1.6439;3.8225,-2.2528,1.1798;4.4957,-3.2578,-2.0065;3.35,-5.3007,-1.182;2.2446,-5.6307,1.2311;2.7779,-3.4469,2.6574;3.9321,-1.3939,1.8428;-.4694,3.9957,.2227;-1.8463,3.8109,.202;-2.4382,3.3508,-.9692;-1.6932,3.0868,-2.1154;-.3152,3.2607,-2.0722;.0169,4.3225,1.1441;-2.4578,4.0006,1.0861;-3.8826,3.1094,-.99;-2.1966,2.7403,-3.0209;.2839,3.0304,-2.9556;2.1186,-5.7976,2.4233;1.7636,-6.3573,.381;-4.4152,2.955,-2.065;-4.4655,3.0563,.0763;6.5491,.1513,-2.1393;5.874,1.3976,-1.9918;7.6851,.0687,-2.9914;8.1182,1.1637,-3.6971;8.2009,-.8918,-3.0854;8.9887,1.0874,-4.3547;6.3299,2.5051,-2.7605;7.4212,2.3911,-3.5879;5.796,3.4554,-2.6955;7.7501,3.255,-4.1724;4.5888,3.9137,-.3247;3.7804,5.0661,-.0992;5.9618,3.9754,.0455;6.5079,5.1291,.5544;6.5871,3.0884,-.0721;7.5655,5.1504,.8316;4.3773,6.2496,.4167;5.7131,6.2871,.7302;3.7461,7.1302,.5708;6.1611,7.2013,1.1292;-2.2668,-3.9115,-2.9403;-2.4857,-4.9462,-2.6363;-3.1026,-3.5627,-3.5756;-1.361,-3.9171,-3.5675;-1.6104,-1.5963,-2.1052;-2.3226,-1.0951,-2.786;-1.4506,-.9552,-1.2244;-.6501,-1.6488,-2.642;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662671549600</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006880809368 0.000777665640 0.022534685894 0.005338166161</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056380009 -0.002718245 0.000138617 0.000244852 0.000326230 0.000387072 0.000399252 0.000500310 0.000549402 0.000640802 0.000767568 0.000836267 0.001038501 0.001103518 0.001251206 0.001264262 0.001294346 0.001412406 0.001517966 0.001698790 0.001792047 0.002152752 0.002301293 0.002718707 0.003038442 0.003320504 0.003684689 0.003790533 0.004051133 0.004515191 0.004863358 0.005102367 0.005334675 0.005786351 0.005885516 0.006057641 0.006755280 0.006985800 0.007276992 0.007855797 0.008130991 0.008703645 0.009333254 0.009610521 0.010172859 0.010747697 0.010963155 0.011728875 0.012853523 0.013074178 0.013483584 0.014470994 0.014594280 0.015332204 0.015599678 0.015699693 0.016218832 0.016389259 0.017809500 0.018234601 0.019109951 0.019390418 0.020244952 0.021385960 0.021828746 0.022641795 0.022794855 0.023262619 0.024359783 0.025572356 0.025757456 0.026373949 0.026722316 0.026944087 0.027853359 0.028459603 0.030056687 0.030449196 0.032122779 0.032655295 0.033716236 0.035169307 0.038642168 0.038846291 0.041016539 0.041483922 0.045215840 0.045263060 0.045607115 0.047697294 0.048882205 0.049680152 0.051493991 0.051678975 0.051831990 0.052281772 0.052369073 0.052579792 0.053190990 0.054354605 0.055770122 0.055894011 0.056505783 0.056898383 0.057177871 0.057847216 0.058649106 0.059229273 0.060232176 0.060818063 0.061570722 0.062605589 0.063967085 0.064657708 0.064841902 0.066130291 0.067290038 0.067994665 0.068670635 0.070786510 0.071615535 0.072370650 0.072827235 0.073796514 0.076571493 0.079917845 0.080960405 0.082477453 0.082886791 0.085611940 0.087978712 0.088930402 0.089613581 0.091207960 0.093086193 0.094286454 0.095331113 0.095850858 0.096759259 0.097863966 0.099540250 0.100102160 0.101277350 0.101911688 0.103052251 0.103316809 0.104337117 0.107561836 0.109482941 0.111074441 0.111274511 0.112228898 0.113340555 0.114893467 0.115569155 0.116533929 0.117370257 0.118296283 0.121471115 0.124236252 0.124881572 0.127633400 0.127975036 0.129699908 0.133342860 0.135608427 0.136822912 0.138345554 0.138402171 0.140329105 0.143337248 0.145295209 0.146126481 0.150674693 0.151482686 0.153110181 0.158775104 0.160268580 0.166146346 0.171019033 0.174654731 0.178092956 0.180864055 0.183595033 0.186743114 0.188171840 0.189726124 0.198408201 0.201874364 0.205414583 0.206086499 0.207149022 0.209009495 0.209316766 0.212236932 0.213099939 0.215607458 0.217418850 0.218986350 0.221795843 0.225104898 0.231645155 0.232768029 0.234390669 0.236285186 0.243699156 0.246951157 0.249648157 0.255255017 0.255786669 0.257069730 0.261879145 0.271397543 0.280423835 0.291294608 0.298065687 0.298946325 0.300518236 0.306319636 0.307480866 0.307605700 0.317985508 0.321042748 0.325308885 0.327806759 0.330520483 0.347119326 0.351178752 0.355361331 0.358156918 0.359356908 0.363913859 0.383444797 0.406171265 0.408155651 0.429886336 0.430072310 0.431971148 0.445853187 0.460600538 0.464707232 0.467547202 0.477888375 0.484977315 0.498045661 0.498580240 0.513438163 0.515364868 0.543071414 0.565494032 0.567244149 0.583666916 0.591453120 0.605527240 0.641092101 0.644852546 0.665639999 0.674503374 0.683502235 0.691724327 0.698872074 0.700035629 0.704245030 0.715576294 0.724572000 0.735433932 0.737762471 0.745029104 0.750711913 0.771592267 0.775929131 0.804772726 0.817550507 0.821231769 0.824064409 0.832857610 0.842251831 0.845277950 0.846912091 0.852803795 0.859247788 0.867356720 0.873399059 0.875232023 0.877835044 0.884013974 0.890861073 0.895751214 0.898973067 0.909701012 0.916655888 0.922788705 0.924366907 0.931607418 0.939001079 0.954286775 0.959073565 0.968653949 0.973741432 0.982085195 0.998490717 1.001355658 1.011951178 1.018490168 1.038893834 1.049026700 1.055313841 1.068315497 1.076495394 1.086978812 1.101292553 1.110219012 1.111406120 1.117033308 1.122488777 1.123486133 1.134604310 1.144642460 1.161333281 1.169904123 1.173362992 1.176330464 1.200547878 1.217437021 1.226563344 1.247339593 1.295354915 1.296065670 1.314287417 1.325129851 1.326343366 1.328096805 1.330160991 1.334556474 1.341057650 1.346136483 1.362446452 1.378807325 1.380920685 1.381477930 1.399286332 1.504992490 1.557683098 1.671877094 1.908671830</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">118</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91592484" y3="-0.94999137" z3="-0.69056818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56281936" y3="-1.95383407" z3="-1.6166906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04692112" y3="-0.9996112" z3="-1.47255094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74409439" y3="1.47466415" z3="-1.11172447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28844671" y3="0.31741489" z3="-0.50425079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62046813" y3="2.73401883" z3="-1.10793326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98424081" y3="2.73484211" z3="-0.87308918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3843549" y3="4.99971872" z3="-0.34174194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78988195" y3="3.85308992" z3="-0.8126347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76834028" y3="5.87753394" z3="-0.12242256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02535846" y3="1.60531441" z3="-1.59163562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.16173506" y3="0.37634767" z3="0.26416963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71254826" y3="0.37612446" z3="-0.53241622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.64146447" y3="0.70684168" z3="0.43995787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64600429" y3="-0.86782696" z3="-1.39031533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1151542" y3="-2.4986696" z3="-1.24671148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.2995788" y3="-5.49962088" z3="-6.1510538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.9787068" y3="-5.06832874" z3="-5.19851237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14568516" y3="-3.93529691" z3="-2.77960547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.94592836" y3="-3.6884554" z3="-5.04551273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.6207369" y3="-5.89872202" z3="-4.13348048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21982955" y3="-5.32603761" z3="-2.9331064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.53753111" y3="-3.08985185" z3="-3.84261904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.23103753" y3="-3.0185684" z3="-5.8604992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66871327" y3="-6.9862614" z3="-4.23012566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98143579" y3="-5.96269712" z3="-2.07677799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68927412" y3="-3.39159386" z3="-1.55234463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33972128" y3="-3.87794975" z3="-0.84938638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67846328" y3="-4.87399692" z3="-1.14620845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42768838" y3="-3.60033256" z3="0.60130492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.56788783" y3="-3.18098781" z3="3.36544725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.80509098" y3="-4.64318703" z3="1.45698257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13789095" y3="-2.34313561" z3="1.14062599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.20521121" y3="-2.13618719" z3="2.51451354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.86669093" y3="-4.43586362" z3="2.8333347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-1.01017763" y3="-5.63632226" z3="1.04700957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12945506" y3="-1.49797691" z3="0.50520188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03540508" y3="-1.1439344" z3="2.90527729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.12789633" y3="-5.26678197" z3="3.49414547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.60966275" y3="-3.02208243" z3="4.44694585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49837472" y3="-1.75415566" z3="-3.80844717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.57165406" y3="-1.3505828" z3="-2.9007866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3134533" y3="3.7196751" z3="-0.91167023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.08559331" y3="-2.98409443" z3="-1.75663897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91906041" y3="-3.15923348" z3="-0.64767731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13137706" y3="-2.28934842" z3="0.28463059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82825679" y3="-0.71030639" z3="0.54114768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.56075836" y3="-0.15707886" z3="-1.08494017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52426365" y3="0.38996798" z3="1.26449426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.17977223" y3="-1.05120662" z3="1.78855552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43415175" y3="-4.36334656" z3="-0.44471513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.20680265" y3="-4.59996622" z3="0.72248897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.80389477" y3="0.23170932" z3="-1.78720914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28454526" y3="0.65896142" z3="-0.9000292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.1052976" y3="-0.97840171" z3="-1.57996605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60134563" y3="0.50540009" z3="0.66382956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.221005" y3="0.0099808" z3="2.25777718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.96959819" y3="1.39090845" z3="1.40612969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6344209" y3="-0.09844749" z3="2.11539127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98312808" y3="-1.67939322" z3="1.37126175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.77417511" y3="-1.55544613" z3="2.68314036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12942578" y3="-3.99752765" z3="0.70718495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.62794184" y3="-4.36949078" z3="1.62982798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.46066372" y3="-5.6677231" z3="0.69386746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2994529" y3="-2.18481668" z3="-0.13898071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14784407" y3="-3.30269716" z3="-0.97203047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50144516" y3="-4.44853949" z3="-0.52434886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00619851" y3="-4.4701243" z3="0.77359915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.17319058" y3="-3.3948551" z3="1.64144258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81629697" y3="-2.25432219" z3="1.17792519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49329061" y3="-3.25744401" z3="-2.00815642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35017622" y3="-5.30241957" z3="-1.18505282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24595083" y3="-5.63589676" z3="1.22784614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.77310659" y3="-3.45059683" z3="2.65473573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.9239632" y3="-1.39522833" z3="1.84110391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47018072" y3="3.99817612" z3="0.21665657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84606335" y3="3.81049784" z3="0.19585114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43555506" y3="3.34921646" z3="-0.97546369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69071542" y3="3.08987029" z3="-2.12427795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31363955" y3="3.26684344" z3="-2.08122245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01596626" y3="4.32345342" z3="1.13992044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.45966932" y3="4.00060841" z3="1.07618096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87997765" y3="3.10675699" z3="-0.99823947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18949543" y3="2.74007678" z3="-3.02726859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28675501" y3="3.036302" z3="-2.96281625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12461315" y3="-5.80619387" z3="2.42001787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76252521" y3="-6.36087404" z3="0.37754053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.4150897" y3="2.95535635" z3="-2.07747553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46312629" y3="3.0535844" z3="0.06882425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55014527" y3="0.15021826" z3="-2.13420301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87585618" y3="1.3970447" z3="-1.98723709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68801681" y3="0.06716241" z3="-2.98365097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.12393323" y3="1.16221676" z3="-3.68756012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20310171" y3="-0.89386426" z3="-3.07728394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.99576749" y3="1.08558398" z3="-4.34332321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33487938" y3="2.50476814" z3="-2.75364254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.42799639" y3="2.39031848" z3="-3.57870374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80186838" y3="3.45562209" z3="-2.68882892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75904482" y3="3.25435427" z3="-4.16183665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58834583" y3="3.91258701" z3="-0.32084322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78041382" y3="5.06558582" z3="-0.09590882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.96050635" y3="3.97244582" z3="0.05334288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.5063057" y3="5.12505256" z3="0.56529331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58538478" y3="3.08508307" z3="-0.06359575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56333106" y3="5.144906" z3="0.84547378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37698328" y3="6.2478674" z3="0.42298943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71216324" y3="6.28371011" z3="0.74011558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74650048" y3="7.12907765" z3="0.57547166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.16009776" y3="7.19703468" z3="1.1414308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.27017019" y3="-3.91653068" z3="-2.9371436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48593904" y3="-4.95144852" z3="-2.62919763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.10886197" y3="-3.57128318" z3="-3.57161931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.3660613" y3="-3.9215085" z3="-3.56659427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6163398" y3="-1.59831394" z3="-2.10784336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33095549" y3="-1.10107286" z3="-2.78803305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4587264" y3="-0.95248944" z3="-1.2283745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.65688448" y3="-1.64885406" z3="-2.64569016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9159,-.95,-.6906;6.5628,-1.9538,-1.6167;6.0469,-.9996,-1.4726;4.7441,1.4747,-1.1117;4.2884,.3174,-.5043;2.6205,2.734,-1.1079;3.9842,2.7348,-.8731;2.3844,4.9997,-.3417;1.7899,3.8531,-.8126;1.7683,5.8775,-.1224;2.0254,1.6053,-1.5916;3.1617,.3763,.2642;1.7125,.3761,-.5324;.6415,.7068,.44;1.646,-.8678,-1.3903;1.1152,-2.4987,-1.2467;2.2996,-5.4996,-6.1511;1.9787,-5.0683,-5.1985;1.1457,-3.9353,-2.7796;1.9459,-3.6885,-5.0455;1.6207,-5.8987,-4.1335;1.2198,-5.326,-2.9331;1.5375,-3.0899,-3.8426;2.231,-3.0186,-5.8605;1.6687,-6.9863,-4.2301;.9814,-5.9627,-2.0768;.6893,-3.3916,-1.5523;-.3397,-3.8779,-.8494;-.6785,-4.874,-1.1462;-.4277,-3.6003,.6013;-.5679,-3.181,3.3654;-.8051,-4.6432,1.457;-.1379,-2.3431,1.1406;-.2052,-2.1362,2.5145;-.8667,-4.4359,2.8333;-1.0102,-5.6363,1.047;.1295,-1.498,.5052;.0354,-1.1439,2.9053;-1.1279,-5.2668,3.4941;-.6097,-3.0221,4.4469;1.4984,-1.7542,-3.8084;1.5717,-1.3506,-2.9008;.3135,3.7197,-.9117;-2.0856,-2.9841,-1.7566;-2.9191,-3.1592,-.6477;-3.1314,-2.2893,.2846;-3.8283,-.7103,.5411;-4.5608,-.1571,-1.0849;-2.5243,.39,1.2645;-5.1798,-1.0512,1.7886;-3.4342,-4.3633,-.4447;-4.2068,-4.6,.7225;-3.8039,.2317,-1.7872;-5.2845,.659,-.9;-5.1053,-.9784,-1.58;-1.6013,.5054,.6638;-2.221,.01,2.2578;-2.9696,1.3909,1.4061;-5.6344,-.0984,2.1154;-5.9831,-1.6794,1.3713;-4.7742,-1.5554,2.6831;-5.1294,-3.9975,.7072;-3.6279,-4.3695,1.6298;-4.4607,-5.6677,.6939;4.2995,-2.1848,-.139;4.1478,-3.3027,-.972;3.5014,-4.4485,-.5243;3.0062,-4.4701,.7736;3.1732,-3.3949,1.6414;3.8163,-2.2543,1.1779;4.4933,-3.2574,-2.0082;3.3502,-5.3024,-1.1851;2.246,-5.6359,1.2278;2.7731,-3.4506,2.6547;3.924,-1.3952,1.8411;-.4702,3.9982,.2167;-1.8461,3.8105,.1959;-2.4356,3.3492,-.9755;-1.6907,3.0899,-2.1243;-.3136,3.2668,-2.0812;.016,4.3235,1.1399;-2.4597,4.0006,1.0762;-3.88,3.1068,-.9982;-2.1895,2.7401,-3.0273;.2868,3.0363,-2.9628;2.1246,-5.8062,2.42;1.7625,-6.3609,.3775;-4.4151,2.9554,-2.0775;-4.4631,3.0536,.0688;6.5501,.1502,-2.1342;5.8759,1.397,-1.9872;7.688,.0672,-2.9837;8.1239,1.1622,-3.6876;8.2031,-.8939,-3.0773;8.9958,1.0856,-4.3433;6.3349,2.5048,-2.7536;7.428,2.3903,-3.5787;5.8019,3.4556,-2.6888;7.759,3.2544,-4.1618;4.5883,3.9126,-.3208;3.7804,5.0656,-.0959;5.9605,3.9724,.0533;6.5063,5.1251,.5653;6.5854,3.0851,-.0636;7.5633,5.1449,.8455;4.377,6.2479,.423;5.7122,6.2837,.7401;3.7465,7.1291,.5755;6.1601,7.197,1.1414;-2.2702,-3.9165,-2.9371;-2.4859,-4.9514,-2.6292;-3.1089,-3.5713,-3.5716;-1.3661,-3.9215,-3.5666;-1.6163,-1.5983,-2.1078;-2.331,-1.1011,-2.788;-1.4587,-.9525,-1.2284;-.6569,-1.6489,-2.6457;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662692913926</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005519467675 0.000737524011 0.020677892266 0.005338960850</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056460416 -0.002488876 0.000139481 0.000253931 0.000326559 0.000387835 0.000399934 0.000500972 0.000549789 0.000641686 0.000767609 0.000836765 0.001041196 0.001105029 0.001256885 0.001264774 0.001295457 0.001415851 0.001517921 0.001699063 0.001791806 0.002157897 0.002301826 0.002725496 0.003039561 0.003322244 0.003693667 0.003801023 0.004051466 0.004515385 0.004865389 0.005108179 0.005336669 0.005798361 0.005885690 0.006059194 0.006756631 0.006986194 0.007295908 0.007868138 0.008130996 0.008707010 0.009342026 0.009611334 0.010187558 0.010749519 0.010965056 0.011728950 0.012887030 0.013084348 0.013522125 0.014471758 0.014598146 0.015333482 0.015600680 0.015705243 0.016300720 0.016390667 0.017813260 0.018242124 0.019137340 0.019395469 0.020245229 0.021394231 0.021840197 0.022642697 0.022849670 0.023262550 0.024359646 0.025663159 0.025765346 0.026380895 0.026724769 0.026948136 0.027860240 0.028459789 0.030057562 0.030449341 0.032123037 0.032662274 0.033822450 0.035178716 0.038645482 0.038857331 0.041020241 0.041488183 0.045217334 0.045269342 0.045626811 0.047955065 0.048960706 0.049684334 0.051496937 0.051690715 0.051832305 0.052281910 0.052369967 0.052585210 0.053197224 0.054446083 0.055784484 0.055897358 0.056509771 0.056900356 0.057179809 0.057863210 0.058649128 0.059229329 0.060258967 0.060820481 0.061580175 0.062618156 0.063967137 0.064657775 0.064843338 0.066134449 0.067294244 0.067994987 0.068670639 0.070936654 0.071615293 0.072371047 0.072827614 0.073844193 0.076575165 0.079970837 0.080973985 0.082535232 0.082901749 0.085788155 0.087999899 0.088999345 0.089631257 0.091208237 0.093096265 0.094294729 0.095331100 0.095855727 0.096760954 0.097863943 0.099608420 0.100108112 0.101279496 0.101911806 0.103053784 0.103344134 0.104340925 0.107567883 0.109536246 0.111105675 0.111332646 0.112248224 0.113371747 0.114913545 0.115805703 0.116537106 0.117379143 0.118302314 0.121532334 0.124261897 0.124907572 0.127635649 0.127993621 0.129707527 0.133350010 0.135608363 0.136906590 0.138350944 0.138909509 0.140817803 0.143345155 0.145298636 0.146126692 0.150722717 0.151486381 0.153111387 0.159074796 0.160293222 0.166193580 0.171022523 0.174655599 0.178108376 0.180866815 0.183599207 0.186744950 0.188172792 0.189726996 0.198420607 0.201875124 0.205415661 0.206105972 0.207149925 0.209017887 0.209323241 0.212236556 0.213118330 0.215835726 0.217420717 0.218995577 0.221802250 0.225114816 0.231648613 0.232768076 0.234393045 0.236312656 0.243703999 0.246954835 0.249648924 0.255260058 0.255794011 0.257072262 0.261909760 0.271401747 0.280445825 0.291294570 0.298087115 0.298946368 0.300527426 0.306391646 0.307494582 0.307617690 0.317989931 0.321043593 0.325310430 0.327807468 0.330579022 0.347124653 0.351180178 0.355361324 0.358173658 0.359358631 0.363916244 0.383445657 0.406171480 0.408722470 0.429890023 0.430144857 0.431973559 0.445875931 0.460719720 0.464712985 0.467630610 0.477888367 0.485054502 0.498045679 0.498642604 0.513446548 0.515422765 0.543071860 0.565494963 0.567244464 0.583704317 0.591515908 0.605546773 0.641098181 0.644871875 0.665640013 0.674590137 0.683765968 0.691727297 0.698906689 0.700040511 0.704245508 0.715700670 0.724578572 0.735445731 0.737803161 0.745029943 0.750712049 0.771593504 0.775929825 0.804801996 0.817550588 0.821244973 0.824575779 0.832909324 0.842678623 0.845279943 0.846925309 0.852803757 0.859256656 0.867356783 0.873433389 0.875247020 0.878423724 0.884046204 0.890896888 0.895763200 0.899276745 0.911869281 0.916855321 0.922848468 0.924372091 0.931639356 0.939003250 0.954300641 0.959076122 0.968945448 0.974349961 0.982090558 0.998490750 1.001360458 1.012021477 1.018490155 1.038896127 1.049034214 1.055315424 1.068424786 1.076497768 1.086985290 1.101547996 1.110219310 1.111407364 1.117107734 1.122489193 1.123487884 1.134609157 1.144664835 1.161335253 1.169906902 1.173392562 1.176340594 1.200548090 1.217488434 1.226635084 1.247341309 1.295362177 1.296068849 1.314291398 1.325134034 1.326343478 1.328121826 1.330161536 1.334564677 1.341058350 1.346137961 1.362447517 1.378807323 1.380920715 1.381480648 1.399470054 1.506745162 1.557693710 1.671877293 1.909683999</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">119</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91266167" y3="-0.95035885" z3="-0.69106285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56153647" y3="-1.95449905" z3="-1.61320987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04562602" y3="-1.00014829" z3="-1.47015128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74346129" y3="1.4747289" z3="-1.11089211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28543172" y3="0.31724649" z3="-0.50564056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62100735" y3="2.73632212" z3="-1.11051665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98424062" y3="2.73548252" z3="-0.87257911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38461333" y3="5.00113957" z3="-0.34095608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79063154" y3="3.85571665" z3="-0.81523865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7687196" y3="5.87891768" z3="-0.12168861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02599148" y3="1.6085394" z3="-1.5966782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15692911" y3="0.37614826" z3="0.26026406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70919036" y3="0.37923387" z3="-0.53910367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6367311" y3="0.71089195" z3="0.43146504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64162152" y3="-0.8640182" z3="-1.39829135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11357462" y3="-2.49602143" z3="-1.25126733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.28967251" y3="-5.50084917" z3="-6.15605329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.97057557" y3="-5.06899552" z3="-5.20323126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.14230637" y3="-3.93362557" z3="-2.78357194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.93716778" y3="-3.68930615" z3="-5.05184901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.61623643" y3="-5.89845369" z3="-4.13612665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.2172276" y3="-5.32449646" z3="-2.93570271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.53264898" y3="-3.08945782" z3="-3.84836938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.21947076" y3="-3.01962609" z3="-5.86794408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66562564" y3="-6.98604713" z3="-4.2314259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98145435" y3="-5.96038516" z3="-2.0780208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68719685" y3="-3.38902319" z3="-1.55586832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33811739" y3="-3.8767121" z3="-0.84954952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67789548" y3="-4.87263867" z3="-1.14477743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.42406997" y3="-3.59604228" z3="0.60054224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.55447247" y3="-3.17223292" z3="3.3644287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.79513996" y3="-4.63846706" z3="1.45939939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13693794" y3="-2.33666113" z3="1.13644582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19934043" y3="-2.12744531" z3="2.51016597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.85149852" y3="-4.42897221" z3="2.83567394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.99935617" y3="-5.63263048" z3="1.05193751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12465064" y3="-1.49147536" z3="0.49847878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.03926015" y3="-1.13332988" z3="2.89798261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.10721844" y3="-5.2595593" z3="3.49889436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.59204508" y3="-3.01170482" z3="4.4458403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.49769368" y3="-1.75418821" z3="-3.81870911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.55655972" y3="-1.346519" z3="-2.90551138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31471782" y3="3.72194511" z3="-0.91633625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.090687" y3="-2.98507006" z3="-1.75558659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91956258" y3="-3.16020844" z3="-0.64390789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1302881" y3="-2.29121881" z3="0.28926727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82845036" y3="-0.71072489" z3="0.54312622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.56802124" y3="-0.15855457" z3="-1.07839895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52317366" y3="0.39146719" z3="1.26137202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.17778101" y3="-1.05186363" z3="1.79561935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.43228751" y3="-4.36482979" z3="-0.43794865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.19974845" y3="-4.60136462" z3="0.7325744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.81720271" y3="0.22029785" z3="-1.78742673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28560085" y3="0.66000607" z3="-0.89195746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.11608085" y3="-0.98405818" z3="-1.57198629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60449469" y3="0.50833448" z3="0.65736938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21403275" y3="0.01735438" z3="2.25091542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97137355" y3="1.39374784" z3="1.40040524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6336664" y3="-0.09957773" z3="2.12174561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98499809" y3="-1.68114009" z3="1.37397955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.77051651" y3="-1.55686622" z3="2.69050456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.12481008" y3="-4.00148328" z3="0.71855118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.61810979" y3="-4.3665463" z3="1.63794936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.45052501" y3="-5.67066008" z3="0.70740018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.29504463" y3="-2.18535391" z3="-0.14098358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14536054" y3="-3.30311436" z3="-0.97463439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50057322" y3="-4.45025383" z3="-0.52772316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00501171" y3="-4.47327729" z3="0.77007779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1691867" y3="-3.39776263" z3="1.63820666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.81056018" y3="-2.25588133" z3="1.17538356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49177145" y3="-3.25712188" z3="-2.01040422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35138131" y3="-5.30429621" z3="-1.18870938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24806257" y3="-5.64136635" z3="1.2239399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76837009" y3="-3.45435656" z3="2.65117389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.91639308" y3="-1.39684865" z3="1.83891571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47065735" y3="3.99917236" z3="0.20987845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8463411" y3="3.80990086" z3="0.18695774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43459168" y3="3.34968709" z3="-0.98652918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68641842" y3="3.0891194" z3="-2.13088471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31006874" y3="3.26904367" z3="-2.08681254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.0134057" y3="4.32395679" z3="1.13411585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46095555" y3="3.99787656" z3="1.0681984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87837447" y3="3.10393832" z3="-1.00972476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18622514" y3="2.74190196" z3="-3.03746958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29165242" y3="3.0416112" z3="-2.96882309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.12936257" y3="-5.81370058" z3="2.41598515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76463085" y3="-6.36613256" z3="0.37342827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40910668" y3="2.94475802" z3="-2.08575215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.463313" y3="3.05323613" z3="0.05587046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5512246" y3="0.14981125" z3="-2.1297605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87745952" y3="1.39697891" z3="-1.98357697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69135275" y3="0.06668185" z3="-2.97599799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.13012916" y3="1.1621135" z3="-3.67742469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2059396" y3="-0.89463733" z3="-3.06902451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.00372543" y3="1.08546865" z3="-4.33059437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33961635" y3="2.50513283" z3="-2.74744329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.43499316" y3="2.39068619" z3="-3.56925545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80739206" y3="3.45640361" z3="-2.68306382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.76852155" y3="3.25514474" z3="-4.15022073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58795665" y3="3.91191203" z3="-0.31714579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78036906" y3="5.06528061" z3="-0.09193283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95948358" y3="3.96985837" z3="0.06009866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50523432" y3="5.12110053" z3="0.57525792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58394108" y3="3.08207632" z3="-0.05723367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.56182124" y3="5.13948652" z3="0.85761214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37671051" y3="6.24604703" z3="0.43077641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.71133013" y3="6.28010728" z3="0.75088264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74612762" y3="7.12756451" z3="0.58463552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15907474" y3="7.19234255" z3="1.15491007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.27443868" y3="-3.92115033" z3="-2.93351582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.48761879" y3="-4.9555457" z3="-2.62412835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.11461325" y3="-3.57838519" z3="-3.5664942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.37141977" y3="-3.9256434" z3="-3.56472437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.62301625" y3="-1.59964035" z3="-2.11038758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.33844627" y3="-1.10460979" z3="-2.79154509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4651685" y3="-0.95394798" z3="-1.23273121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.66266283" y3="-1.65017008" z3="-2.64845507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9127,-.9504,-.6911;6.5615,-1.9545,-1.6132;6.0456,-1.0001,-1.4702;4.7435,1.4747,-1.1109;4.2854,.3172,-.5056;2.621,2.7363,-1.1105;3.9842,2.7355,-.8726;2.3846,5.0011,-.341;1.7906,3.8557,-.8152;1.7687,5.8789,-.1217;2.026,1.6085,-1.5967;3.1569,.3761,.2603;1.7092,.3792,-.5391;.6367,.7109,.4315;1.6416,-.864,-1.3983;1.1136,-2.496,-1.2513;2.2897,-5.5008,-6.1561;1.9706,-5.069,-5.2032;1.1423,-3.9336,-2.7836;1.9372,-3.6893,-5.0518;1.6162,-5.8985,-4.1361;1.2172,-5.3245,-2.9357;1.5326,-3.0895,-3.8484;2.2195,-3.0196,-5.8679;1.6656,-6.986,-4.2314;.9815,-5.9604,-2.078;.6872,-3.389,-1.5559;-.3381,-3.8767,-.8495;-.6779,-4.8726,-1.1448;-.4241,-3.596,.6005;-.5545,-3.1722,3.3644;-.7951,-4.6385,1.4594;-.1369,-2.3367,1.1364;-.1993,-2.1274,2.5102;-.8515,-4.429,2.8357;-.9994,-5.6326,1.0519;.1247,-1.4915,.4985;.0393,-1.1333,2.898;-1.1072,-5.2596,3.4989;-.592,-3.0117,4.4458;1.4977,-1.7542,-3.8187;1.5566,-1.3465,-2.9055;.3147,3.7219,-.9163;-2.0907,-2.9851,-1.7556;-2.9196,-3.1602,-.6439;-3.1303,-2.2912,.2893;-3.8285,-.7107,.5431;-4.568,-.1586,-1.0784;-2.5232,.3915,1.2614;-5.1778,-1.0519,1.7956;-3.4323,-4.3648,-.4379;-4.1997,-4.6014,.7326;-3.8172,.2203,-1.7874;-5.2856,.66,-.892;-5.1161,-.9841,-1.572;-1.6045,.5083,.6574;-2.214,.0174,2.2509;-2.9714,1.3937,1.4004;-5.6337,-.0996,2.1217;-5.985,-1.6811,1.374;-4.7705,-1.5569,2.6905;-5.1248,-4.0015,.7186;-3.6181,-4.3665,1.6379;-4.4505,-5.6707,.7074;4.295,-2.1854,-.141;4.1454,-3.3031,-.9746;3.5006,-4.4503,-.5277;3.005,-4.4733,.7701;3.1692,-3.3978,1.6382;3.8106,-2.2559,1.1754;4.4918,-3.2571,-2.0104;3.3514,-5.3043,-1.1887;2.2481,-5.6414,1.2239;2.7684,-3.4544,2.6512;3.9164,-1.3968,1.8389;-.4707,3.9992,.2099;-1.8463,3.8099,.187;-2.4346,3.3497,-.9865;-1.6864,3.0891,-2.1309;-.3101,3.269,-2.0868;.0134,4.324,1.1341;-2.461,3.9979,1.0682;-3.8784,3.1039,-1.0097;-2.1862,2.7419,-3.0375;.2917,3.0416,-2.9688;2.1294,-5.8137,2.416;1.7646,-6.3661,.3734;-4.4091,2.9448,-2.0858;-4.4633,3.0532,.0559;6.5512,.1498,-2.1298;5.8775,1.397,-1.9836;7.6914,.0667,-2.976;8.1301,1.1621,-3.6774;8.2059,-.8946,-3.069;9.0037,1.0855,-4.3306;6.3396,2.5051,-2.7474;7.435,2.3907,-3.5693;5.8074,3.4564,-2.6831;7.7685,3.2551,-4.1502;4.588,3.9119,-.3171;3.7804,5.0653,-.0919;5.9595,3.9699,.0601;6.5052,5.1211,.5753;6.5839,3.0821,-.0572;7.5618,5.1395,.8576;4.3767,6.246,.4308;5.7113,6.2801,.7509;3.7461,7.1276,.5846;6.1591,7.1923,1.1549;-2.2744,-3.9212,-2.9335;-2.4876,-4.9555,-2.6241;-3.1146,-3.5784,-3.5665;-1.3714,-3.9256,-3.5647;-1.623,-1.5996,-2.1104;-2.3384,-1.1046,-2.7915;-1.4652,-.9539,-1.2327;-.6627,-1.6502,-2.6485;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662710089397</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004372677675 0.000706486912 0.018431157406 0.005338291342</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056496476 -0.002396752 0.000139483 0.000252350 0.000327662 0.000395423 0.000400324 0.000501101 0.000552410 0.000641880 0.000768196 0.000836710 0.001048251 0.001107133 0.001257114 0.001266156 0.001305167 0.001419464 0.001518112 0.001699250 0.001791687 0.002160712 0.002303370 0.002729569 0.003040235 0.003322264 0.003699747 0.003802513 0.004055081 0.004522530 0.004867461 0.005110429 0.005338250 0.005807122 0.005887501 0.006059071 0.006756525 0.006989102 0.007306225 0.007877684 0.008134332 0.008708383 0.009351098 0.009615199 0.010231243 0.010766059 0.010970417 0.011730274 0.012896159 0.013103039 0.013544925 0.014472210 0.014599102 0.015342466 0.015600934 0.015710977 0.016371111 0.016394508 0.017815487 0.018254994 0.019251876 0.019395149 0.020245302 0.021393145 0.021840312 0.022646040 0.022976082 0.023263618 0.024365675 0.025752245 0.025826304 0.026384702 0.026729417 0.026947789 0.027865048 0.028460392 0.030059495 0.030449729 0.032124997 0.032673430 0.033958140 0.035179367 0.038648025 0.038883227 0.041026044 0.041507489 0.045218111 0.045285090 0.045649536 0.048177496 0.049194458 0.049692998 0.051503108 0.051724689 0.051834039 0.052281930 0.052371077 0.052595672 0.053197550 0.054577655 0.055786514 0.055904464 0.056515903 0.056901185 0.057181212 0.057884534 0.058649583 0.059230255 0.060258715 0.060822510 0.061583086 0.062631146 0.063968196 0.064658023 0.064856207 0.066140264 0.067296868 0.067994912 0.068671235 0.071022456 0.071617864 0.072373715 0.072828088 0.073846300 0.076580127 0.080022539 0.080984006 0.082594739 0.082919097 0.085877948 0.088007986 0.089020457 0.089636258 0.091208170 0.093117995 0.094294392 0.095331929 0.095857743 0.096760936 0.097864102 0.099627169 0.100111072 0.101281753 0.101912071 0.103055097 0.103352544 0.104342727 0.107571173 0.109550810 0.111114967 0.111404762 0.112260071 0.113382078 0.114912617 0.116012982 0.116540611 0.117402545 0.118308552 0.121574960 0.124271037 0.124926080 0.127638645 0.128017701 0.129708234 0.133353840 0.135613313 0.136960680 0.138352109 0.139121694 0.141263080 0.143353202 0.145298286 0.146127375 0.150849523 0.151487514 0.153111744 0.159217742 0.160353399 0.166240893 0.171023954 0.174655998 0.178124037 0.180869739 0.183600991 0.186745451 0.188177483 0.189733723 0.198432848 0.201876442 0.205416486 0.206139337 0.207151731 0.209056383 0.209437412 0.212245810 0.213145804 0.215923370 0.217421279 0.219035959 0.221803451 0.225123477 0.231658894 0.232768206 0.234402723 0.236375243 0.243727892 0.246958679 0.249651096 0.255268237 0.255804739 0.257072348 0.261913393 0.271409942 0.280492151 0.291304056 0.298135981 0.298949177 0.300531119 0.306429166 0.307510027 0.307655004 0.318015158 0.321044604 0.325320488 0.327817929 0.330687780 0.347131331 0.351181833 0.355361349 0.358177289 0.359363276 0.363919178 0.383446113 0.406179176 0.409467524 0.429890122 0.430157357 0.431982359 0.445898207 0.460817296 0.464716466 0.467682069 0.477888851 0.485089377 0.498046528 0.498679250 0.513447436 0.515466627 0.543071957 0.565495343 0.567244595 0.583763052 0.591543407 0.605555833 0.641100124 0.644878979 0.665640219 0.674614566 0.684221493 0.691729216 0.699092738 0.700085500 0.704246190 0.715753136 0.724579561 0.735446168 0.737828086 0.745057416 0.750712714 0.771594880 0.775930030 0.804843601 0.817554149 0.821246438 0.825472874 0.832936232 0.843531980 0.845295056 0.846934281 0.852804386 0.859267459 0.867357250 0.873494138 0.875253250 0.878945707 0.884114918 0.890909519 0.895786599 0.899511027 0.913234315 0.916943878 0.922931192 0.924373210 0.931669743 0.939008677 0.954395768 0.959100451 0.969105076 0.974524244 0.982090648 0.998491284 1.001591065 1.012189851 1.018494861 1.038898302 1.049057025 1.055320247 1.068511677 1.076498503 1.086988203 1.101704739 1.110219811 1.111408438 1.117274810 1.122489222 1.123487956 1.134618648 1.144714680 1.161337617 1.169908336 1.173470731 1.176351395 1.200548378 1.217594609 1.226765073 1.247341424 1.295374500 1.296074647 1.314299078 1.325157618 1.326344003 1.328160833 1.330161615 1.334579093 1.341060857 1.346138489 1.362447320 1.378807340 1.380921259 1.381481261 1.399765225 1.507883644 1.557729143 1.671882948 1.910371489</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">120</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91041583" y3="-0.95091301" z3="-0.69157858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56077343" y3="-1.95508024" z3="-1.61122723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04512121" y3="-1.00054833" z3="-1.46826541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74409472" y3="1.47469575" z3="-1.10874846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28361943" y3="0.31687643" z3="-0.50595956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62284816" y3="2.73699507" z3="-1.11252023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98528191" y3="2.73555146" z3="-0.87104003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38536491" y3="5.00039248" z3="-0.3407484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79177765" y3="3.85568252" z3="-0.81727208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76927493" y3="5.87798273" z3="-0.12182254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0292369" y3="1.6100664" z3="-1.60220243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.15330473" y3="0.37576444" z3="0.25711368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70788555" y3="0.38062611" z3="-0.54633207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63366653" y3="0.71407223" z3="0.42155134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64166548" y3="-0.86241393" z3="-1.40558662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11159155" y3="-2.49295014" z3="-1.25683834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.27993716" y3="-5.5013097" z3="-6.16031332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.96251639" y3="-5.06872894" z3="-5.20719698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13811442" y3="-3.93263988" z3="-2.78694736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.92711183" y3="-3.68856487" z3="-5.05696637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.61148873" y3="-5.8977307" z3="-4.13878491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21483441" y3="-5.32352335" z3="-2.93776813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.52271991" y3="-3.08831693" z3="-3.85348277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.20679482" y3="-3.01984786" z3="-5.87479287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.66161286" y3="-6.98535998" z3="-4.23334875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98179024" y3="-5.95898691" z3="-2.07908108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68602344" y3="-3.38756396" z3="-1.55868604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3381963" y3="-3.87470959" z3="-0.84989195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67658257" y3="-4.87213685" z3="-1.14240162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.4206992" y3="-3.5918213" z3="0.60001687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.54268307" y3="-3.1623981" z3="3.36343669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.78623061" y3="-4.63332873" z3="1.46223563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13516489" y3="-2.33072903" z3="1.13240856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.19332927" y3="-2.11860534" z3="2.50582839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.83840696" y3="-4.42095979" z3="2.83827919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.98915683" y3="-5.62906062" z3="1.05755709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.12181725" y3="-1.48635625" z3="0.49175042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04395077" y3="-1.12308347" z3="2.89065496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.0896398" y3="-5.25080274" z3="3.50405383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.57671245" y3="-2.99967497" z3="4.44464221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47926252" y3="-1.75248921" z3="-3.82127938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.55958631" y3="-1.34779602" z3="-2.91589213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3158665" y3="3.7220048" z3="-0.92123146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09256713" y3="-2.98810685" z3="-1.7538456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91910553" y3="-3.16216533" z3="-0.63971123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.13075633" y3="-2.2892423" z3="0.29015412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83170538" y3="-0.7116537" z3="0.54507701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.57512157" y3="-0.16377858" z3="-1.07898482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52619038" y3="0.39470869" z3="1.25594465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.17397453" y3="-1.05247395" z3="1.80189193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42753855" y3="-4.36815698" z3="-0.42868175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.19297484" y3="-4.60258246" z3="0.74357566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.82331269" y3="0.21493147" z3="-1.79118456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28983357" y3="0.65845528" z3="-0.89135668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.13042325" y3="-0.98533595" z3="-1.56515431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61011231" y3="0.51022136" z3="0.6488454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21553632" y3="0.01873663" z3="2.24834122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97406648" y3="1.39459431" z3="1.39736755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6296788" y3="-0.0994001" z3="2.12748635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97857725" y3="-1.68447567" z3="1.39217112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.76047508" y3="-1.55203057" z3="2.69462188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.11810444" y3="-4.00350237" z3="0.73051825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.61036557" y3="-4.3666186" z3="1.64712495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.44294976" y3="-5.67138103" z3="0.72011979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2918141" y3="-2.18624662" z3="-0.14344777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14430911" y3="-3.30381859" z3="-0.97775418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50088899" y3="-4.45205886" z3="-0.53188154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00458852" y3="-4.47649395" z3="0.7656256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16573531" y3="-3.40084805" z3="1.63409907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.80552482" y3="-2.25769277" z3="1.17219815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4917965" y3="-3.25689558" z3="-2.01310459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35410212" y3="-5.30638831" z3="-1.19305995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25044942" y3="-5.64646962" z3="1.21891516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76394769" y3="-3.45837956" z3="2.64663693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90903308" y3="-1.3984767" z3="1.83597165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47113874" y3="3.9989654" z3="0.2041545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84713977" y3="3.80993329" z3="0.1791831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43323665" y3="3.34845923" z3="-0.99379286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68532672" y3="3.09255506" z3="-2.14163549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30781091" y3="3.27033102" z3="-2.09337993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.01188794" y3="4.32434421" z3="1.12839703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46251115" y3="3.99674548" z3="1.06022423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8769143" y3="3.10159268" z3="-1.0200687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18234806" y3="2.74335567" z3="-3.04663359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29495584" y3="3.04217867" z3="-2.97399976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13409137" y3="-5.82098122" z3="2.41094984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76685235" y3="-6.37061634" z3="0.36807074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40777568" y3="2.94262713" z3="-2.09928307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4632464" y3="3.05222206" z3="0.0449511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55313997" y3="0.14979874" z3="-2.12523715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8799377" y3="1.39727552" z3="-1.97898145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6953095" y3="0.06697324" z3="-2.96890003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1365379" y3="1.16300886" z3="-3.66790043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20955037" y3="-0.89456194" z3="-3.06186214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.01181234" y3="1.08664337" z3="-4.31899492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34445625" y3="2.5060324" z3="-2.74065088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44178591" y3="2.39185629" z3="-3.56011332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81244445" y3="3.45744833" z3="-2.67673374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.77727329" y3="3.25675935" z3="-4.13939632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.588159" y3="3.91092914" z3="-0.31270335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.78052406" y3="5.06404667" z3="-0.0883863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95836542" y3="3.96789977" z3="0.0685222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50283227" y3="5.11802039" z3="0.58725438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58261103" y3="3.08018891" z3="-0.04817669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55814484" y3="5.13569505" z3="0.87310721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37592748" y3="6.24374529" z3="0.4376151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70917372" y3="6.27686562" z3="0.76204984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74563153" y3="7.12500081" z3="0.59037585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15597273" y3="7.18813552" z3="1.16912205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.2789334" y3="-3.92563844" z3="-2.92963226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49043065" y3="-4.95971988" z3="-2.61731179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.12105532" y3="-3.5851885" z3="-3.56142924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.37754387" y3="-3.93029847" z3="-3.5630861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.628585" y3="-1.60241026" z3="-2.11278447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.34624825" y3="-1.11085492" z3="-2.79475044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47122481" y3="-0.95179512" z3="-1.23716742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.67061275" y3="-1.65215593" z3="-2.65286579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9104,-.9509,-.6916;6.5608,-1.9551,-1.6112;6.0451,-1.0005,-1.4683;4.7441,1.4747,-1.1087;4.2836,.3169,-.506;2.6228,2.737,-1.1125;3.9853,2.7356,-.871;2.3854,5.0004,-.3407;1.7918,3.8557,-.8173;1.7693,5.878,-.1218;2.0292,1.6101,-1.6022;3.1533,.3758,.2571;1.7079,.3806,-.5463;.6337,.7141,.4216;1.6417,-.8624,-1.4056;1.1116,-2.493,-1.2568;2.2799,-5.5013,-6.1603;1.9625,-5.0687,-5.2072;1.1381,-3.9326,-2.7869;1.9271,-3.6886,-5.057;1.6115,-5.8977,-4.1388;1.2148,-5.3235,-2.9378;1.5227,-3.0883,-3.8535;2.2068,-3.0198,-5.8748;1.6616,-6.9854,-4.2333;.9818,-5.959,-2.0791;.686,-3.3876,-1.5587;-.3382,-3.8747,-.8499;-.6766,-4.8721,-1.1424;-.4207,-3.5918,.6;-.5427,-3.1624,3.3634;-.7862,-4.6333,1.4622;-.1352,-2.3307,1.1324;-.1933,-2.1186,2.5058;-.8384,-4.421,2.8383;-.9892,-5.6291,1.0576;.1218,-1.4864,.4918;.044,-1.1231,2.8907;-1.0896,-5.2508,3.5041;-.5767,-2.9997,4.4446;1.4793,-1.7525,-3.8213;1.5596,-1.3478,-2.9159;.3159,3.722,-.9212;-2.0926,-2.9881,-1.7538;-2.9191,-3.1622,-.6397;-3.1308,-2.2892,.2902;-3.8317,-.7117,.5451;-4.5751,-.1638,-1.079;-2.5262,.3947,1.2559;-5.174,-1.0525,1.8019;-3.4275,-4.3682,-.4287;-4.193,-4.6026,.7436;-3.8233,.2149,-1.7912;-5.2898,.6585,-.8914;-5.1304,-.9853,-1.5652;-1.6101,.5102,.6488;-2.2155,.0187,2.2483;-2.9741,1.3946,1.3974;-5.6297,-.0994,2.1275;-5.9786,-1.6845,1.3922;-4.7605,-1.552,2.6946;-5.1181,-4.0035,.7305;-3.6104,-4.3666,1.6471;-4.4429,-5.6714,.7201;4.2918,-2.1862,-.1434;4.1443,-3.3038,-.9778;3.5009,-4.4521,-.5319;3.0046,-4.4765,.7656;3.1657,-3.4008,1.6341;3.8055,-2.2577,1.1722;4.4918,-3.2569,-2.0131;3.3541,-5.3064,-1.1931;2.2504,-5.6465,1.2189;2.7639,-3.4584,2.6466;3.909,-1.3985,1.836;-.4711,3.999,.2042;-1.8471,3.8099,.1792;-2.4332,3.3485,-.9938;-1.6853,3.0926,-2.1416;-.3078,3.2703,-2.0934;.0119,4.3243,1.1284;-2.4625,3.9967,1.0602;-3.8769,3.1016,-1.0201;-2.1823,2.7434,-3.0466;.295,3.0422,-2.974;2.1341,-5.821,2.4109;1.7669,-6.3706,.3681;-4.4078,2.9426,-2.0993;-4.4632,3.0522,.045;6.5531,.1498,-2.1252;5.8799,1.3973,-1.979;7.6953,.067,-2.9689;8.1365,1.163,-3.6679;8.2096,-.8946,-3.0619;9.0118,1.0866,-4.319;6.3445,2.506,-2.7407;7.4418,2.3919,-3.5601;5.8124,3.4574,-2.6767;7.7773,3.2568,-4.1394;4.5882,3.9109,-.3127;3.7805,5.064,-.0884;5.9584,3.9679,.0685;6.5028,5.118,.5873;6.5826,3.0802,-.0482;7.5581,5.1357,.8731;4.3759,6.2437,.4376;5.7092,6.2769,.762;3.7456,7.125,.5904;6.156,7.1881,1.1691;-2.2789,-3.9256,-2.9296;-2.4904,-4.9597,-2.6173;-3.1211,-3.5852,-3.5614;-1.3775,-3.9303,-3.5631;-1.6286,-1.6024,-2.1128;-2.3462,-1.1109,-2.7948;-1.4712,-.9518,-1.2372;-.6706,-1.6522,-2.6529;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662729424363</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003603030154 0.000642579032 0.016972938190 0.005336713012</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056507442 -0.002014180 0.000140091 0.000252792 0.000327593 0.000393861 0.000400138 0.000502915 0.000552514 0.000641908 0.000767998 0.000837437 0.001050647 0.001109203 0.001258066 0.001268500 0.001306316 0.001419526 0.001520362 0.001699283 0.001791548 0.002162353 0.002306835 0.002729728 0.003041969 0.003322759 0.003702762 0.003802553 0.004054195 0.004530388 0.004870012 0.005113337 0.005338904 0.005806342 0.005895191 0.006059256 0.006758861 0.007002087 0.007310190 0.007879882 0.008144383 0.008709628 0.009354917 0.009619306 0.010282025 0.010802033 0.010983816 0.011734370 0.012895485 0.013116428 0.013556867 0.014474135 0.014600486 0.015354256 0.015601872 0.015714611 0.016388434 0.016434426 0.017816107 0.018258866 0.019347705 0.019431439 0.020245294 0.021397266 0.021842513 0.022648511 0.023124901 0.023269002 0.024377692 0.025761270 0.025962391 0.026386061 0.026735765 0.026949690 0.027868766 0.028464411 0.030061292 0.030451129 0.032123878 0.032677315 0.034070320 0.035179493 0.038650703 0.038921540 0.041034841 0.041533911 0.045218076 0.045301758 0.045661292 0.048282640 0.049502644 0.049736698 0.051510446 0.051775954 0.051842527 0.052281932 0.052371885 0.052608218 0.053197640 0.054753604 0.055790227 0.055907933 0.056523170 0.056901500 0.057181891 0.057906571 0.058651880 0.059231514 0.060270204 0.060823465 0.061582808 0.062634169 0.063969144 0.064658659 0.064873406 0.066143476 0.067299827 0.067995218 0.068672209 0.071087658 0.071623737 0.072379160 0.072830364 0.073857090 0.076581257 0.080065407 0.080989206 0.082632180 0.082926305 0.085922943 0.088008755 0.089021390 0.089636526 0.091208134 0.093142253 0.094295117 0.095334061 0.095860455 0.096760929 0.097864026 0.099625926 0.100111005 0.101283339 0.101914966 0.103058738 0.103353892 0.104343337 0.107574743 0.109560567 0.111116789 0.111470924 0.112267946 0.113385676 0.114917951 0.116132952 0.116545753 0.117425815 0.118312646 0.121612118 0.124282190 0.124938691 0.127646723 0.128035581 0.129709493 0.133355514 0.135619732 0.136994010 0.138359245 0.139213282 0.141477271 0.143357106 0.145298262 0.146127206 0.151016610 0.151487782 0.153113378 0.159233737 0.160395368 0.166292956 0.171024917 0.174656182 0.178139839 0.180874444 0.183610233 0.186745452 0.188186284 0.189751356 0.198445534 0.201879294 0.205416548 0.206171920 0.207153848 0.209079049 0.209622937 0.212278562 0.213175978 0.215943469 0.217427853 0.219121314 0.221803052 0.225132788 0.231675298 0.232768866 0.234424243 0.236485027 0.243824155 0.246959388 0.249659550 0.255275930 0.255817081 0.257074017 0.261913275 0.271419654 0.280552841 0.291326977 0.298205947 0.298952059 0.300531095 0.306438807 0.307517837 0.307709761 0.318048405 0.321044542 0.325346499 0.327829902 0.330802219 0.347133622 0.351182051 0.355362512 0.358177702 0.359368844 0.363920807 0.383447996 0.406194917 0.410336500 0.429898285 0.430161000 0.431982139 0.445910218 0.460898071 0.464721327 0.467716045 0.477888879 0.485097757 0.498049352 0.498700254 0.513465180 0.515499745 0.543072286 0.565495408 0.567244670 0.583824466 0.591548302 0.605557707 0.641107597 0.644880383 0.665641121 0.674616056 0.684730578 0.691730065 0.699217221 0.700198947 0.704247398 0.715758377 0.724598785 0.735447483 0.737835435 0.745078262 0.750713646 0.771596054 0.775930038 0.804881546 0.817565723 0.821246606 0.826418012 0.832943468 0.844612738 0.845383354 0.846938349 0.852806964 0.859278542 0.867359399 0.873599698 0.875253145 0.879338811 0.884236092 0.890910754 0.895823873 0.899688537 0.913838776 0.916956636 0.922980521 0.924373951 0.931689128 0.939030202 0.954517886 0.959146841 0.969224600 0.974587694 0.982090702 0.998491597 1.002073761 1.012410772 1.018518811 1.038899757 1.049087356 1.055326766 1.068576302 1.076498564 1.086989218 1.101764141 1.110220921 1.111408432 1.117486182 1.122489461 1.123487975 1.134631907 1.144797924 1.161338574 1.169909800 1.173597882 1.176360477 1.200549024 1.217673742 1.227020876 1.247341619 1.295379010 1.296087479 1.314313980 1.325282635 1.326344824 1.328193611 1.330162363 1.334597505 1.341065047 1.346142104 1.362448149 1.378807350 1.380921853 1.381484370 1.400095646 1.508483644 1.557772656 1.671883050 1.910894792</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">121</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90896681" y3="-0.95144687" z3="-0.69245839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56109908" y3="-1.95530813" z3="-1.60919325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04549143" y3="-1.00072853" z3="-1.46642759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74451974" y3="1.47475778" z3="-1.10754263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28221279" y3="0.31638064" z3="-0.50721574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62363033" y3="2.73861889" z3="-1.11529162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98554416" y3="2.73581217" z3="-0.87014905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38550456" y3="5.00108895" z3="-0.34003408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79261479" y3="3.85770833" z3="-0.82071558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76929516" y3="5.87869735" z3="-0.12042583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03057443" y3="1.61236405" z3="-1.60746814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1501146" y3="0.37479172" z3="0.25324463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70612627" y3="0.38259056" z3="-0.55283327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.63056982" y3="0.71676369" z3="0.41356723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63933613" y3="-0.85978329" z3="-1.41320607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10996417" y3="-2.49126074" z3="-1.26091886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.26768718" y3="-5.50271273" z3="-6.16559093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.95243008" y3="-5.06972892" z3="-5.2120019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13398666" y3="-3.9318238" z3="-2.79036025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.91667558" y3="-3.68978275" z3="-5.06304918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60533416" y3="-5.89799143" z3="-4.14161898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21121167" y3="-5.32278925" z3="-2.94017152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51678983" y3="-3.08878904" z3="-3.85866181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.19344246" y3="-3.02104529" z3="-5.8817841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65642565" y3="-6.98564807" z3="-4.23527619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98104899" y3="-5.95761238" z3="-2.08019844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68345648" y3="-3.38546066" z3="-1.56173123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33810378" y3="-3.87313141" z3="-0.84994476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67658143" y3="-4.87109397" z3="-1.14012769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41815272" y3="-3.58718679" z3="0.59948466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.53220681" y3="-3.15198442" z3="3.3623426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.77781815" y3="-4.62803266" z3="1.46524106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13460272" y3="-2.32397184" z3="1.12810431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1887" y3="-2.10894772" z3="2.50116244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.82611433" y3="-4.41268392" z3="2.84099117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9787405" y3="-5.62564479" z3="1.06369154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11819634" y3="-1.48038177" z3="0.48487487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04758539" y3="-1.11203459" z3="2.88284676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.07266686" y3="-5.24191005" z3="3.50953599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.56320462" y3="-2.98692079" z3="4.44326775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47803113" y3="-1.75352682" z3="-3.83089548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.54523466" y3="-1.34421051" z3="-2.91949961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31673589" y3="3.72508796" z3="-0.92742071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09660035" y3="-2.98970802" z3="-1.75253499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91993745" y3="-3.16297948" z3="-0.63663342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12986173" y3="-2.29031481" z3="0.29340538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83120422" y3="-0.71159403" z3="0.54511691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.58212634" y3="-0.16779553" z3="-1.07322952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52567028" y3="0.39774023" z3="1.25344011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1709574" y3="-1.05162203" z3="1.80775545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42728468" y3="-4.36828798" z3="-0.4229604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.18714993" y3="-4.60306908" z3="0.75303547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.83480989" y3="0.20247713" z3="-1.79167291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.29331024" y3="0.65749411" z3="-0.88617224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.14079302" y3="-0.99171945" z3="-1.55431084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60934189" y3="0.51544354" z3="0.64425433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20985537" y3="0.0271489" z3="2.2430217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97665008" y3="1.39829894" z3="1.39258242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62874968" y3="-0.10046966" z3="2.13357467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97712239" y3="-1.68691461" z3="1.39580951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.75548797" y3="-1.55010673" z3="2.70303285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.11325601" y3="-4.00552981" z3="0.74339464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.60033236" y3="-4.36419262" z3="1.65374054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.43578644" y3="-5.67273001" z3="0.73299714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28927927" y3="-2.18715926" z3="-0.14634326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14408255" y3="-3.30454314" z3="-0.98135506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50172362" y3="-4.45385737" z3="-0.53669149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00411088" y3="-4.47946898" z3="0.7603199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16230194" y3="-3.40378953" z3="1.62924556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.8010036" y3="-2.25958989" z3="1.16851648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49318632" y3="-3.25692033" z3="-2.01613649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35759776" y3="-5.3084609" z3="-1.19808613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25211009" y3="-5.65105357" z3="1.21282838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75931823" y3="-3.46225383" z3="2.6412736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.90251871" y3="-1.40058595" z3="1.8327611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47228877" y3="4.00046142" z3="0.19753985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84750426" y3="3.80920887" z3="0.1705362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43138942" y3="3.34751312" z3="-1.00433266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67970578" y3="3.08897789" z3="-2.14675864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30419777" y3="3.27240079" z3="-2.09982863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00886589" y3="4.32489843" z3="1.12369295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46561131" y3="3.99704514" z3="1.04810016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87434142" y3="3.09732684" z3="-1.03058012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17557252" y3="2.74019212" z3="-3.05401289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30016674" y3="3.04631578" z3="-2.98047202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.13801113" y3="-5.82783747" z3="2.40476844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76777444" y3="-6.37418691" z3="0.36151593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40184875" y3="2.93209689" z3="-2.10828151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46243153" y3="3.04975177" z3="0.03390093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55558484" y3="0.15017704" z3="-2.12087847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88266499" y3="1.39782133" z3="-1.97473611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69970803" y3="0.06775768" z3="-2.96192733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.14316931" y3="1.16438748" z3="-3.65859874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21362211" y3="-0.89395363" z3="-3.05495992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.01981799" y3="1.08828612" z3="-4.30795365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34981963" y3="2.50734368" z3="-2.73354505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44896688" y3="2.39356066" z3="-3.55059426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81834968" y3="3.4591072" z3="-2.66919294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.78626682" y3="3.25899978" z3="-4.12798548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58752451" y3="3.90996487" z3="-0.30805907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77983308" y3="5.0633212" z3="-0.0836164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95692494" y3="3.96554089" z3="0.07681574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.50080544" y3="5.11460794" z3="0.5987739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.58121401" y3="3.07767115" z3="-0.03997142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55579433" y3="5.13116943" z3="0.8870654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37438414" y3="6.24190964" z3="0.44592371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70721611" y3="6.27374152" z3="0.77354163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7441" y3="7.12348282" z3="0.59840573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15358495" y3="7.18422587" z3="1.18301051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28304657" y3="-3.93131589" z3="-2.92570227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49068564" y3="-4.965449" z3="-2.60994342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1281584" y3="-3.59483526" z3="-3.5562537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.38330883" y3="-3.93522502" z3="-3.56145417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63476244" y3="-1.60438282" z3="-2.11482066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.35362616" y3="-1.11521466" z3="-2.79608839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47764545" y3="-0.95318365" z3="-1.24044646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.67527145" y3="-1.65398897" z3="-2.6547575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.909,-.9514,-.6925;6.5611,-1.9553,-1.6092;6.0455,-1.0007,-1.4664;4.7445,1.4748,-1.1075;4.2822,.3164,-.5072;2.6236,2.7386,-1.1153;3.9855,2.7358,-.8701;2.3855,5.0011,-.34;1.7926,3.8577,-.8207;1.7693,5.8787,-.1204;2.0306,1.6124,-1.6075;3.1501,.3748,.2532;1.7061,.3826,-.5528;.6306,.7168,.4136;1.6393,-.8598,-1.4132;1.11,-2.4913,-1.2609;2.2677,-5.5027,-6.1656;1.9524,-5.0697,-5.212;1.134,-3.9318,-2.7904;1.9167,-3.6898,-5.063;1.6053,-5.898,-4.1416;1.2112,-5.3228,-2.9402;1.5168,-3.0888,-3.8587;2.1934,-3.021,-5.8818;1.6564,-6.9856,-4.2353;.981,-5.9576,-2.0802;.6835,-3.3855,-1.5617;-.3381,-3.8731,-.8499;-.6766,-4.8711,-1.1401;-.4182,-3.5872,.5995;-.5322,-3.152,3.3623;-.7778,-4.628,1.4652;-.1346,-2.324,1.1281;-.1887,-2.1089,2.5012;-.8261,-4.4127,2.841;-.9787,-5.6256,1.0637;.1182,-1.4804,.4849;.0476,-1.112,2.8828;-1.0727,-5.2419,3.5095;-.5632,-2.9869,4.4433;1.478,-1.7535,-3.8309;1.5452,-1.3442,-2.9195;.3167,3.7251,-.9274;-2.0966,-2.9897,-1.7525;-2.9199,-3.163,-.6366;-3.1299,-2.2903,.2934;-3.8312,-.7116,.5451;-4.5821,-.1678,-1.0732;-2.5257,.3977,1.2534;-5.171,-1.0516,1.8078;-3.4273,-4.3683,-.423;-4.1871,-4.6031,.753;-3.8348,.2025,-1.7917;-5.2933,.6575,-.8862;-5.1408,-.9917,-1.5543;-1.6093,.5154,.6443;-2.2099,.0271,2.243;-2.9767,1.3983,1.3926;-5.6287,-.1005,2.1336;-5.9771,-1.6869,1.3958;-4.7555,-1.5501,2.703;-5.1133,-4.0055,.7434;-3.6003,-4.3642,1.6537;-4.4358,-5.6727,.733;4.2893,-2.1872,-.1463;4.1441,-3.3045,-.9814;3.5017,-4.4539,-.5367;3.0041,-4.4795,.7603;3.1623,-3.4038,1.6292;3.801,-2.2596,1.1685;4.4932,-3.2569,-2.0161;3.3576,-5.3085,-1.1981;2.2521,-5.6511,1.2128;2.7593,-3.4623,2.6413;3.9025,-1.4006,1.8328;-.4723,4.0005,.1975;-1.8475,3.8092,.1705;-2.4314,3.3475,-1.0043;-1.6797,3.089,-2.1468;-.3042,3.2724,-2.0998;.0089,4.3249,1.1237;-2.4656,3.997,1.0481;-3.8743,3.0973,-1.0306;-2.1756,2.7402,-3.054;.3002,3.0463,-2.9805;2.138,-5.8278,2.4048;1.7678,-6.3742,.3615;-4.4018,2.9321,-2.1083;-4.4624,3.0498,.0339;6.5556,.1502,-2.1209;5.8827,1.3978,-1.9747;7.6997,.0678,-2.9619;8.1432,1.1644,-3.6586;8.2136,-.894,-3.055;9.0198,1.0883,-4.308;6.3498,2.5073,-2.7335;7.449,2.3936,-3.5506;5.8183,3.4591,-2.6692;7.7863,3.259,-4.128;4.5875,3.91,-.3081;3.7798,5.0633,-.0836;5.9569,3.9655,.0768;6.5008,5.1146,.5988;6.5812,3.0777,-.04;7.5558,5.1312,.8871;4.3744,6.2419,.4459;5.7072,6.2737,.7735;3.7441,7.1235,.5984;6.1536,7.1842,1.183;-2.283,-3.9313,-2.9257;-2.4907,-4.9654,-2.6099;-3.1282,-3.5948,-3.5563;-1.3833,-3.9352,-3.5615;-1.6348,-1.6044,-2.1148;-2.3536,-1.1152,-2.7961;-1.4776,-.9532,-1.2404;-.6753,-1.654,-2.6548;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662754265233</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003141057924 0.000538607897 0.016357954104 0.005336665958</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056513292 -0.001421821 0.000140021 0.000252161 0.000327885 0.000396482 0.000401826 0.000505813 0.000554670 0.000643668 0.000767984 0.000840638 0.001051643 0.001109377 0.001262535 0.001270859 0.001308166 0.001419801 0.001523620 0.001700699 0.001791490 0.002162440 0.002309404 0.002732861 0.003044985 0.003323347 0.003702501 0.003803091 0.004054021 0.004530849 0.004870369 0.005114176 0.005349062 0.005811256 0.005900599 0.006064433 0.006761055 0.007016241 0.007310496 0.007879848 0.008153895 0.008710237 0.009354963 0.009621358 0.010297072 0.010834933 0.010990623 0.011739002 0.012899502 0.013120174 0.013557196 0.014478496 0.014600182 0.015360157 0.015605266 0.015715181 0.016388789 0.016447099 0.017816104 0.018258869 0.019353814 0.019556330 0.020245325 0.021406254 0.021847339 0.022649293 0.023215248 0.023283318 0.024386294 0.025763468 0.026073391 0.026388079 0.026749243 0.026953392 0.027872864 0.028469948 0.030061736 0.030452361 0.032128920 0.032679367 0.034118621 0.035183567 0.038650972 0.038942843 0.041042639 0.041561757 0.045220546 0.045316137 0.045681730 0.048307671 0.049617977 0.049876441 0.051514235 0.051799288 0.051866279 0.052281937 0.052372194 0.052618640 0.053197656 0.054907797 0.055791568 0.055907977 0.056527581 0.056901511 0.057181802 0.057919325 0.058654926 0.059231763 0.060306342 0.060823366 0.061589655 0.062633919 0.063969427 0.064661914 0.064885344 0.066144733 0.067300313 0.067995311 0.068672228 0.071138104 0.071633584 0.072380206 0.072833047 0.073858826 0.076581402 0.080087656 0.080990405 0.082652908 0.082928714 0.085932837 0.088010496 0.089023569 0.089637201 0.091208567 0.093162607 0.094298977 0.095335628 0.095860334 0.096761120 0.097864818 0.099631442 0.100111282 0.101284998 0.101923582 0.103059726 0.103353915 0.104345297 0.107575505 0.109566028 0.111117540 0.111524238 0.112273979 0.113388439 0.114943041 0.116181461 0.116555185 0.117440010 0.118312414 0.121629992 0.124283169 0.124941209 0.127656059 0.128043371 0.129714526 0.133356425 0.135625644 0.137012243 0.138367793 0.139238172 0.141523319 0.143358471 0.145298408 0.146127291 0.151175714 0.151489489 0.153113927 0.159234551 0.160439037 0.166345590 0.171029302 0.174656723 0.178157294 0.180887810 0.183612811 0.186745018 0.188197153 0.189775650 0.198451207 0.201882206 0.205416534 0.206192570 0.207155146 0.209085661 0.209746722 0.212325403 0.213197110 0.215943883 0.217454315 0.219221486 0.221807586 0.225141460 0.231690669 0.232769571 0.234444140 0.236592448 0.243895452 0.246960555 0.249666427 0.255284443 0.255829361 0.257080976 0.261914150 0.271427321 0.280616444 0.291355377 0.298280657 0.298959710 0.300532646 0.306438443 0.307519958 0.307753265 0.318097521 0.321046390 0.325386455 0.327847780 0.330886294 0.347133557 0.351182345 0.355366648 0.358200375 0.359373844 0.363921049 0.383453252 0.406210542 0.410966603 0.429910369 0.430207423 0.431985137 0.445909872 0.460962600 0.464726700 0.467733499 0.477889039 0.485097597 0.498053020 0.498711792 0.513490928 0.515513963 0.543074418 0.565495628 0.567244835 0.583869403 0.591548815 0.605557984 0.641112660 0.644881093 0.665642313 0.674617471 0.685070776 0.691731043 0.699286314 0.700506021 0.704247958 0.715760657 0.724649397 0.735485437 0.737835470 0.745078461 0.750714325 0.771596787 0.775930212 0.804903707 0.817578971 0.821248034 0.827074991 0.832944806 0.845122403 0.845887133 0.846942271 0.852813756 0.859288553 0.867361766 0.873731561 0.875254484 0.879612769 0.884387316 0.890910968 0.895897829 0.899805422 0.914107947 0.916979629 0.922993384 0.924376906 0.931695489 0.939061042 0.954593662 0.959198695 0.969256003 0.974589423 0.982091479 0.998491789 1.002528249 1.012608691 1.018550740 1.038900767 1.049116588 1.055332044 1.068612432 1.076499676 1.086989299 1.101776309 1.110222495 1.111410175 1.117649894 1.122489672 1.123488251 1.134640711 1.144875849 1.161338555 1.169911335 1.173728606 1.176366608 1.200549628 1.217700316 1.227387496 1.247341748 1.295379695 1.296100312 1.314324942 1.325377298 1.326346657 1.328227824 1.330162417 1.334608422 1.341065792 1.346143454 1.362448035 1.378807366 1.380922051 1.381485841 1.400460880 1.508693005 1.557818431 1.671883036 1.911196177</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">122</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90783258" y3="-0.95161186" z3="-0.69390099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56196866" y3="-1.95485198" z3="-1.60764163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04615033" y3="-1.00034543" z3="-1.46532542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74554106" y3="1.4751232" z3="-1.10624098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28114427" y3="0.31621087" z3="-0.50850037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62540537" y3="2.73938506" z3="-1.1169872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98669364" y3="2.73615408" z3="-0.86884762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38519337" y3="5.0003109" z3="-0.33822488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79340837" y3="3.85758805" z3="-0.82178129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76856726" y3="5.87744475" z3="-0.11913642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0337402" y3="1.61388817" z3="-1.61260559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14744334" y3="0.37424613" z3="0.24958256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7052576" y3="0.38385105" z3="-0.55969379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62835377" y3="0.71948363" z3="0.40458335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6390957" y3="-0.85822835" z3="-1.42035896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10847461" y3="-2.48900393" z3="-1.26567312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.25502835" y3="-5.50460174" z3="-6.17024409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.94235055" y3="-5.0707541" z3="-5.2161509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12970302" y3="-3.93124596" z3="-2.79349806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90559861" y3="-3.69043351" z3="-5.06843427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59898234" y3="-5.89824708" z3="-4.14403791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20800201" y3="-5.32230642" z3="-2.9419641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50748137" y3="-3.08845891" z3="-3.86375043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.17940678" y3="-3.02270095" z3="-5.88904928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65062169" y3="-6.98599369" z3="-4.23672899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98092499" y3="-5.95645282" z3="-2.08069031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68233434" y3="-3.38449925" z3="-1.56409109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33779333" y3="-3.87189307" z3="-0.84959945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6755626" y3="-4.87075344" z3="-1.13745289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41473528" y3="-3.5836041" z3="0.59952791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.52303709" y3="-3.14249602" z3="3.36158002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.77068024" y3="-4.62278232" z3="1.46815823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13260085" y3="-2.31883071" z3="1.12480713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18368406" y3="-2.10077817" z3="2.49745404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.81602603" y3="-4.40454654" z3="2.84354849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.97168203" y3="-5.62070908" z3="1.06885015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1158921" y3="-1.47584684" z3="0.47885856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05097983" y3="-1.10215721" z3="2.87615337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.05987548" y3="-5.23245413" z3="3.51422036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.5517506" y3="-2.97516148" z3="4.44219283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46331461" y3="-1.75267936" z3="-3.83467548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.54438107" y3="-1.34571182" z3="-2.92870323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31810875" y3="3.724045" z3="-0.93162444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09879046" y3="-2.99272321" z3="-1.74975184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91961917" y3="-3.16456252" z3="-0.6310213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12980689" y3="-2.28913204" z3="0.2966427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83374868" y3="-0.71161281" z3="0.54862655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.58887627" y3="-0.17152299" z3="-1.07231003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52657699" y3="0.39994717" z3="1.24646957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16809579" y3="-1.0514315" z3="1.8155029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42308271" y3="-4.37146501" z3="-0.41260191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.18051038" y3="-4.60372901" z3="0.76517353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.84255211" y3="0.1966696" z3="-1.79442769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.29611688" y3="0.65597498" z3="-0.8833114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.15256625" y3="-0.99462984" z3="-1.54766331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61446887" y3="0.51660452" z3="0.6336453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20811581" y3="0.02788009" z3="2.23691381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97488077" y3="1.40047326" z3="1.38676403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62417927" y3="-0.09785867" z3="2.13941053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97481809" y3="-1.68705891" z3="1.41216747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.74738512" y3="-1.54676807" z3="2.70720746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.10852804" y3="-4.00838046" z3="0.75441021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.59327796" y3="-4.36088376" z3="1.66441471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.42608372" y3="-5.67410334" z3="0.74820281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.287318" y3="-2.18781355" z3="-0.14975991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14460637" y3="-3.30510314" z3="-0.98538491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50324752" y3="-4.45547519" z3="-0.54197341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0041619" y3="-4.48230717" z3="0.7544571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15937058" y3="-3.40655833" z3="1.62381445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7969517" y3="-2.26120747" z3="1.16426071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49541605" y3="-3.25673542" z3="-2.01954205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36180239" y3="-5.31039544" z3="-1.20351204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25386229" y3="-5.65533566" z3="1.20589637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75505167" y3="-3.46590513" z3="2.63526786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89621717" y3="-1.40215733" z3="1.82886366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47301064" y3="4.00039401" z3="0.19059141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84833545" y3="3.80836428" z3="0.16195353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4300581" y3="3.34526481" z3="-1.01272985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67805553" y3="3.09085822" z3="-2.15821409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30120433" y3="3.27186394" z3="-2.10589885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00628759" y3="4.32629905" z3="1.11650939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.46644552" y3="3.99313341" z3="1.04258017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87319402" y3="3.09456081" z3="-1.0429091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17202548" y3="2.74091344" z3="-3.06522306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3046848" y3="3.04506173" z3="-2.98459261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14037792" y3="-5.83350065" z3="2.39759267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77001713" y3="-6.3781963" z3="0.35402377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3996172" y3="2.92661547" z3="-2.12198375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46300218" y3="3.05031843" z3="0.02020894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55828344" y3="0.151137" z3="-2.11712915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88557593" y3="1.39885091" z3="-1.97100814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70464063" y3="0.06952282" z3="-2.95505038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.15053464" y3="1.16708466" z3="-3.64860405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21843658" y3="-0.89222561" z3="-3.04794429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.02906682" y3="1.09170121" z3="-4.29521524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.35513513" y3="2.50929037" z3="-2.7270425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.45655954" y3="2.39635592" z3="-3.54090989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82386615" y3="3.46109499" z3="-2.66300281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.79594332" y3="3.26259786" z3="-4.11581077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5875017" y3="3.90929471" z3="-0.30361974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77926749" y3="5.06218434" z3="-0.0789086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95611087" y3="3.96394866" z3="0.08429587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49886651" y3="5.11184507" z3="0.60985728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5804758" y3="3.07617469" z3="-0.03286186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.55306939" y3="5.12773856" z3="0.90065609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37273313" y3="6.23954465" z3="0.45470202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70468953" y3="6.27054689" z3="0.78557923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74186724" y3="7.12075217" z3="0.60864094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15000328" y3="7.18003602" z3="1.19834293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.28753252" y3="-3.93600535" z3="-2.92073092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49460191" y3="-4.96912621" z3="-2.60371501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.13338969" y3="-3.6003707" z3="-3.54953633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.38914591" y3="-3.94073305" z3="-3.55850253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63944127" y3="-1.60745338" z3="-2.11612787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3601348" y3="-1.12093359" z3="-2.79885113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48151924" y3="-0.95362444" z3="-1.24386352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68249587" y3="-1.65679754" z3="-2.65834321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9078,-.9516,-.6939;6.562,-1.9549,-1.6076;6.0462,-1.0003,-1.4653;4.7455,1.4751,-1.1062;4.2811,.3162,-.5085;2.6254,2.7394,-1.117;3.9867,2.7362,-.8688;2.3852,5.0003,-.3382;1.7934,3.8576,-.8218;1.7686,5.8774,-.1191;2.0337,1.6139,-1.6126;3.1474,.3742,.2496;1.7053,.3839,-.5597;.6284,.7195,.4046;1.6391,-.8582,-1.4204;1.1085,-2.489,-1.2657;2.255,-5.5046,-6.1702;1.9424,-5.0708,-5.2162;1.1297,-3.9312,-2.7935;1.9056,-3.6904,-5.0684;1.599,-5.8982,-4.144;1.208,-5.3223,-2.942;1.5075,-3.0885,-3.8638;2.1794,-3.0227,-5.889;1.6506,-6.986,-4.2367;.9809,-5.9565,-2.0807;.6823,-3.3845,-1.5641;-.3378,-3.8719,-.8496;-.6756,-4.8708,-1.1375;-.4147,-3.5836,.5995;-.523,-3.1425,3.3616;-.7707,-4.6228,1.4682;-.1326,-2.3188,1.1248;-.1837,-2.1008,2.4975;-.816,-4.4045,2.8435;-.9717,-5.6207,1.0689;.1159,-1.4758,.4789;.051,-1.1022,2.8762;-1.0599,-5.2325,3.5142;-.5518,-2.9752,4.4422;1.4633,-1.7527,-3.8347;1.5444,-1.3457,-2.9287;.3181,3.724,-.9316;-2.0988,-2.9927,-1.7498;-2.9196,-3.1646,-.631;-3.1298,-2.2891,.2966;-3.8337,-.7116,.5486;-4.5889,-.1715,-1.0723;-2.5266,.3999,1.2465;-5.1681,-1.0514,1.8155;-3.4231,-4.3715,-.4126;-4.1805,-4.6037,.7652;-3.8426,.1967,-1.7944;-5.2961,.656,-.8833;-5.1526,-.9946,-1.5477;-1.6145,.5166,.6336;-2.2081,.0279,2.2369;-2.9749,1.4005,1.3868;-5.6242,-.0979,2.1394;-5.9748,-1.6871,1.4122;-4.7474,-1.5468,2.7072;-5.1085,-4.0084,.7544;-3.5933,-4.3609,1.6644;-4.4261,-5.6741,.7482;4.2873,-2.1878,-.1498;4.1446,-3.3051,-.9854;3.5032,-4.4555,-.542;3.0042,-4.4823,.7545;3.1594,-3.4066,1.6238;3.797,-2.2612,1.1643;4.4954,-3.2567,-2.0195;3.3618,-5.3104,-1.2035;2.2539,-5.6553,1.2059;2.7551,-3.4659,2.6353;3.8962,-1.4022,1.8289;-.473,4.0004,.1906;-1.8483,3.8084,.162;-2.4301,3.3453,-1.0127;-1.6781,3.0909,-2.1582;-.3012,3.2719,-2.1059;.0063,4.3263,1.1165;-2.4664,3.9931,1.0426;-3.8732,3.0946,-1.0429;-2.172,2.7409,-3.0652;.3047,3.0451,-2.9846;2.1404,-5.8335,2.3976;1.77,-6.3782,.354;-4.3996,2.9266,-2.122;-4.463,3.0503,.0202;6.5583,.1511,-2.1171;5.8856,1.3989,-1.971;7.7046,.0695,-2.9551;8.1505,1.1671,-3.6486;8.2184,-.8922,-3.0479;9.0291,1.0917,-4.2952;6.3551,2.5093,-2.727;7.4566,2.3964,-3.5409;5.8239,3.4611,-2.663;7.7959,3.2626,-4.1158;4.5875,3.9093,-.3036;3.7793,5.0622,-.0789;5.9561,3.9639,.0843;6.4989,5.1118,.6099;6.5805,3.0762,-.0329;7.5531,5.1277,.9007;4.3727,6.2395,.4547;5.7047,6.2705,.7856;3.7419,7.1208,.6086;6.15,7.18,1.1983;-2.2875,-3.936,-2.9207;-2.4946,-4.9691,-2.6037;-3.1334,-3.6004,-3.5495;-1.3891,-3.9407,-3.5585;-1.6394,-1.6075,-2.1161;-2.3601,-1.1209,-2.7989;-1.4815,-.9536,-1.2439;-.6825,-1.6568,-2.6583;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662775391038</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002324191155 0.000421371552 0.016677339859 0.005338848619</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056516290 -0.001078608 0.000140716 0.000252609 0.000327711 0.000396094 0.000401232 0.000507230 0.000556736 0.000643509 0.000768122 0.000847563 0.001051600 0.001109494 0.001265466 0.001286112 0.001307813 0.001421287 0.001531875 0.001702876 0.001794033 0.002163138 0.002311616 0.002751883 0.003048018 0.003327613 0.003702675 0.003805781 0.004058201 0.004531833 0.004870986 0.005115839 0.005382595 0.005836834 0.005907140 0.006089763 0.006764881 0.007029122 0.007311101 0.007880266 0.008158305 0.008711785 0.009356854 0.009620983 0.010300471 0.010869147 0.010999584 0.011742431 0.012906586 0.013120572 0.013557427 0.014484691 0.014600225 0.015364656 0.015612343 0.015715254 0.016388870 0.016451942 0.017816273 0.018261538 0.019358736 0.019697603 0.020246377 0.021408386 0.021853444 0.022649677 0.023246126 0.023301794 0.024388852 0.025764145 0.026117764 0.026389784 0.026765376 0.026956129 0.027877857 0.028484883 0.030061747 0.030453462 0.032158014 0.032678900 0.034130680 0.035194089 0.038650910 0.038950104 0.041051307 0.041587056 0.045233532 0.045324444 0.045703398 0.048312371 0.049637693 0.049987768 0.051515993 0.051803071 0.051883233 0.052281941 0.052372196 0.052622187 0.053198471 0.055014783 0.055793174 0.055914212 0.056529082 0.056902238 0.057182582 0.057921927 0.058657145 0.059232173 0.060358224 0.060824690 0.061606483 0.062635318 0.063969432 0.064669803 0.064888952 0.066144682 0.067300341 0.067996247 0.068672761 0.071217089 0.071644196 0.072381052 0.072836519 0.073859553 0.076581595 0.080098180 0.080990339 0.082658327 0.082928847 0.085938957 0.088015800 0.089028323 0.089638333 0.091209177 0.093173698 0.094302539 0.095336396 0.095860465 0.096761950 0.097866735 0.099639423 0.100111440 0.101286847 0.101945226 0.103061790 0.103354228 0.104345709 0.107575693 0.109579606 0.111118373 0.111563637 0.112282940 0.113391795 0.114975969 0.116186228 0.116562365 0.117443346 0.118317151 0.121643876 0.124284419 0.124940989 0.127666756 0.128044162 0.129724437 0.133356580 0.135626567 0.137016744 0.138376675 0.139243571 0.141523064 0.143358339 0.145304825 0.146128098 0.151280867 0.151495490 0.153114277 0.159242514 0.160451104 0.166389771 0.171040451 0.174658399 0.178182504 0.180911533 0.183613383 0.186744433 0.188208596 0.189806280 0.198453910 0.201886099 0.205417308 0.206207414 0.207156127 0.209087897 0.209787846 0.212361638 0.213205805 0.215962059 0.217510453 0.219327030 0.221815871 0.225151662 0.231700478 0.232769692 0.234460843 0.236710944 0.244016288 0.246961077 0.249674277 0.255290641 0.255836509 0.257092378 0.261914455 0.271430439 0.280674792 0.291381423 0.298356974 0.298960544 0.300541057 0.306445487 0.307520926 0.307776023 0.318116707 0.321055913 0.325449581 0.327856152 0.330936239 0.347136750 0.351185582 0.355376352 0.358263258 0.359374855 0.363921047 0.383455347 0.406219264 0.411361438 0.429915425 0.430301881 0.432014149 0.445918731 0.460985931 0.464734431 0.467734327 0.477889060 0.485101473 0.498056616 0.498713791 0.513512954 0.515515507 0.543080867 0.565495666 0.567245514 0.583890681 0.591549317 0.605561094 0.641121159 0.644881855 0.665643168 0.674620084 0.685226533 0.691736746 0.699285634 0.700655192 0.704248199 0.715787559 0.724737073 0.735507039 0.737837605 0.745157144 0.750714647 0.771597261 0.775930589 0.804907763 0.817592863 0.821248865 0.827349816 0.832944826 0.845177934 0.846361662 0.846942329 0.852823478 0.859292683 0.867365200 0.873864848 0.875279528 0.879702875 0.884537860 0.890911759 0.895965982 0.899861378 0.914191858 0.917040758 0.922993377 0.924380551 0.931697108 0.939106010 0.954613546 0.959223409 0.969269931 0.974589774 0.982091660 0.998491871 1.002836550 1.012710440 1.018581719 1.038900808 1.049131898 1.055334205 1.068624799 1.076502047 1.086989305 1.101777592 1.110224826 1.111417111 1.117722013 1.122489670 1.123488287 1.134643424 1.144929403 1.161340007 1.169913803 1.173827539 1.176371538 1.200549886 1.217701261 1.227817471 1.247342804 1.295379618 1.296114460 1.314337531 1.325456144 1.326350322 1.328257338 1.330162572 1.334614663 1.341066934 1.346152001 1.362448421 1.378807623 1.380923814 1.381486348 1.400886361 1.508740176 1.557840128 1.671887217 1.911314507</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">123</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90736414" y3="-0.95209479" z3="-0.69507282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56311506" y3="-1.95471765" z3="-1.60680456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04737955" y3="-1.00018561" z3="-1.46406927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74689763" y3="1.47530609" z3="-1.10422747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28066002" y3="0.31567802" z3="-0.50931831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62724318" y3="2.74019929" z3="-1.11936696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98776907" y3="2.73623824" z3="-0.86725641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38611254" y3="5.00007141" z3="-0.33867254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79491422" y3="3.85830967" z3="-0.82525917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76911766" y3="5.87709185" z3="-0.11913114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03672452" y3="1.61522194" z3="-1.61755106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14521995" y3="0.37300934" z3="0.246159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70456255" y3="0.38517303" z3="-0.56585981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62633676" y3="0.72222527" z3="0.39656706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63802114" y3="-0.85649865" z3="-1.42710742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10728958" y3="-2.48774481" z3="-1.26934733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.24072845" y3="-5.50602" z3="-6.17569373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.93092268" y3="-5.07176184" z3="-5.22088056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12566988" y3="-3.93104146" z3="-2.79630579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.89392106" y3="-3.69152217" z3="-5.07408019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59181829" y3="-5.89868083" z3="-4.14694108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20433991" y3="-5.32210974" z3="-2.94403747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50014011" y3="-3.08911843" z3="-3.86834698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.16455143" y3="-3.02398555" z3="-5.89585085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64386425" y3="-6.98641247" z3="-4.23903842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98046503" y3="-5.95574103" z3="-2.0815621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68071072" y3="-3.38336618" z3="-1.56624805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3375908" y3="-3.87061736" z3="-0.84946283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67472594" y3="-4.87057682" z3="-1.13473428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.41260442" y3="-3.57954955" z3="0.5993228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.51595991" y3="-3.13252026" z3="3.36079775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.76290125" y3="-4.61850334" z3="1.47136296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13307084" y3="-2.31254933" z3="1.12112721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.18157473" y3="-2.09156312" z3="2.49336425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.80594547" y3="-4.39714935" z3="2.84641735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9598556" y3="-5.61968952" z3="1.0755685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11259124" y3="-1.47071779" z3="0.47319549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05205275" y3="-1.09191228" z3="2.86938251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.04502459" y3="-5.22488665" z3="3.51981072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.54265939" y3="-2.96283479" z3="4.44112346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45751586" y3="-1.75366656" z3="-3.8415755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53543588" y3="-1.34394781" z3="-2.93349494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31939126" y3="3.7256162" z3="-0.93754133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10144845" y3="-2.99497211" z3="-1.74803499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91983318" y3="-3.16572813" z3="-0.62798774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12862661" y3="-2.28894975" z3="0.29861347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8332266" y3="-0.71233903" z3="0.54858147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.59500294" y3="-0.17730967" z3="-1.06821734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5274567" y3="0.40519482" z3="1.24530949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16242581" y3="-1.05081935" z3="1.82117549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.42278559" y3="-4.37147192" z3="-0.40685303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1751886" y3="-4.60365938" z3="0.77457325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.8518017" y3="0.18560255" z3="-1.79544303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30091966" y3="0.6530745" z3="-0.88093315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.16253012" y3="-1.00120376" z3="-1.53844227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61579615" y3="0.52239404" z3="0.63015075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20451379" y3="0.04073189" z3="2.23545008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98269129" y3="1.40318663" z3="1.38399925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6219992" y3="-0.10008506" z3="2.14606841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96802299" y3="-1.69139339" z3="1.41930482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.73864801" y3="-1.542577" z3="2.71615593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.10221127" y3="-4.00812166" z3="0.76910862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.58344538" y3="-4.36113725" z3="1.67046414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.42186552" y3="-5.67326496" z3="0.75928244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28580952" y3="-2.18879072" z3="-0.15332604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14502418" y3="-3.3055275" z3="-0.98992258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50409853" y3="-4.45671422" z3="-0.54808583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00361391" y3="-4.48490759" z3="0.74779308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15640461" y3="-3.40953261" z3="1.61791436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79343489" y3="-2.26332861" z3="1.15986774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49740666" y3="-3.2561987" z3="-2.02348341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36463789" y3="-5.31145546" z3="-1.21013883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25465725" y3="-5.6591975" z3="1.19804854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75082153" y3="-3.46993467" z3="2.62880191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8909495" y3="-1.40462039" z3="1.82507542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47368283" y3="4.0014338" z3="0.18466025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84889059" y3="3.80950546" z3="0.1526077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42843508" y3="3.34512122" z3="-1.02346387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67282102" y3="3.08659062" z3="-2.16321812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29742316" y3="3.27175103" z3="-2.11183017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00429135" y3="4.32703388" z3="1.11208306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47057065" y3="3.99864915" z3="1.02642422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87022434" y3="3.0901735" z3="-1.05272655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16525573" y3="2.73539012" z3="-3.07109964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30991271" y3="3.0456086" z3="-2.99038807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1430186" y3="-5.83992609" z3="2.3896851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76997395" y3="-6.38053041" z3="0.34539436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39359554" y3="2.91692226" z3="-2.13196367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46224464" y3="3.04795307" z3="0.00973488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56154706" y3="0.15207634" z3="-2.1128697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8890849" y3="1.39992187" z3="-1.96620743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.7097406" y3="0.07112399" z3="-2.9485877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.157714" y3="1.1694759" z3="-3.6396503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22326721" y3="-0.8907729" z3="-3.04199581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.03758417" y3="1.09455457" z3="-4.28483017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3609496" y3="2.51129592" z3="-2.7194492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.46407996" y3="2.39895648" z3="-3.5314289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82995545" y3="3.46329544" z3="-2.65507084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.80511915" y3="3.26584059" z3="-4.10447744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58748615" y3="3.90838568" z3="-0.29869169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77916616" y3="5.06115832" z3="-0.07519882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95457573" y3="3.96232962" z3="0.09384741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4957629" y3="5.1094012" z3="0.62282167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57907795" y3="3.07475697" z3="-0.02235867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54876764" y3="5.12477573" z3="0.91733343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37129617" y3="6.23775479" z3="0.46126064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70185933" y3="6.26808578" z3="0.79680212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74068902" y3="7.11876929" z3="0.61260434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14619337" y3="7.1769459" z3="1.21193542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29145055" y3="-3.94133827" z3="-2.91659263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49433375" y3="-4.97494071" z3="-2.59535226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1410306" y3="-3.61004193" z3="-3.54407492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.39505063" y3="-3.9450334" z3="-3.55694625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64492698" y3="-1.60976302" z3="-2.11812672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36699009" y3="-1.12563535" z3="-2.79932908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48783661" y3="-0.95283467" z3="-1.2470176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.6870394" y3="-1.65895255" z3="-2.66051877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9074,-.9521,-.6951;6.5631,-1.9547,-1.6068;6.0474,-1.0002,-1.4641;4.7469,1.4753,-1.1042;4.2807,.3157,-.5093;2.6272,2.7402,-1.1194;3.9878,2.7362,-.8673;2.3861,5.0001,-.3387;1.7949,3.8583,-.8253;1.7691,5.8771,-.1191;2.0367,1.6152,-1.6176;3.1452,.373,.2462;1.7046,.3852,-.5659;.6263,.7222,.3966;1.638,-.8565,-1.4271;1.1073,-2.4877,-1.2693;2.2407,-5.506,-6.1757;1.9309,-5.0718,-5.2209;1.1257,-3.931,-2.7963;1.8939,-3.6915,-5.0741;1.5918,-5.8987,-4.1469;1.2043,-5.3221,-2.944;1.5001,-3.0891,-3.8683;2.1646,-3.024,-5.8959;1.6439,-6.9864,-4.239;.9805,-5.9557,-2.0816;.6807,-3.3834,-1.5662;-.3376,-3.8706,-.8495;-.6747,-4.8706,-1.1347;-.4126,-3.5795,.5993;-.516,-3.1325,3.3608;-.7629,-4.6185,1.4714;-.1331,-2.3125,1.1211;-.1816,-2.0916,2.4934;-.8059,-4.3971,2.8464;-.9599,-5.6197,1.0756;.1126,-1.4707,.4732;.0521,-1.0919,2.8694;-1.045,-5.2249,3.5198;-.5427,-2.9628,4.4411;1.4575,-1.7537,-3.8416;1.5354,-1.3439,-2.9335;.3194,3.7256,-.9375;-2.1014,-2.995,-1.748;-2.9198,-3.1657,-.628;-3.1286,-2.2889,.2986;-3.8332,-.7123,.5486;-4.595,-.1773,-1.0682;-2.5275,.4052,1.2453;-5.1624,-1.0508,1.8212;-3.4228,-4.3715,-.4069;-4.1752,-4.6037,.7746;-3.8518,.1856,-1.7954;-5.3009,.6531,-.8809;-5.1625,-1.0012,-1.5384;-1.6158,.5224,.6302;-2.2045,.0407,2.2355;-2.9827,1.4032,1.384;-5.622,-.1001,2.1461;-5.968,-1.6914,1.4193;-4.7386,-1.5426,2.7162;-5.1022,-4.0081,.7691;-3.5834,-4.3611,1.6705;-4.4219,-5.6733,.7593;4.2858,-2.1888,-.1533;4.145,-3.3055,-.9899;3.5041,-4.4567,-.5481;3.0036,-4.4849,.7478;3.1564,-3.4095,1.6179;3.7934,-2.2633,1.1599;4.4974,-3.2562,-2.0235;3.3646,-5.3115,-1.2101;2.2547,-5.6592,1.198;2.7508,-3.4699,2.6288;3.8909,-1.4046,1.8251;-.4737,4.0014,.1847;-1.8489,3.8095,.1526;-2.4284,3.3451,-1.0235;-1.6728,3.0866,-2.1632;-.2974,3.2718,-2.1118;.0043,4.327,1.1121;-2.4706,3.9986,1.0264;-3.8702,3.0902,-1.0527;-2.1653,2.7354,-3.0711;.3099,3.0456,-2.9904;2.143,-5.8399,2.3897;1.77,-6.3805,.3454;-4.3936,2.9169,-2.132;-4.4622,3.048,.0097;6.5615,.1521,-2.1129;5.8891,1.3999,-1.9662;7.7097,.0711,-2.9486;8.1577,1.1695,-3.6397;8.2233,-.8908,-3.042;9.0376,1.0946,-4.2848;6.3609,2.5113,-2.7194;7.4641,2.399,-3.5314;5.83,3.4633,-2.6551;7.8051,3.2658,-4.1045;4.5875,3.9084,-.2987;3.7792,5.0612,-.0752;5.9546,3.9623,.0938;6.4958,5.1094,.6228;6.5791,3.0748,-.0224;7.5488,5.1248,.9173;4.3713,6.2378,.4613;5.7019,6.2681,.7968;3.7407,7.1188,.6126;6.1462,7.1769,1.2119;-2.2915,-3.9413,-2.9166;-2.4943,-4.9749,-2.5954;-3.141,-3.61,-3.5441;-1.3951,-3.945,-3.5569;-1.6449,-1.6098,-2.1181;-2.367,-1.1256,-2.7993;-1.4878,-.9528,-1.247;-.687,-1.659,-2.6605;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662790075165</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002855871996 0.000396051703 0.017207510228 0.005339238350</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056517410 -0.001104006 0.000140991 0.000252708 0.000327671 0.000396491 0.000401901 0.000510003 0.000558200 0.000643419 0.000769041 0.000849795 0.001051529 0.001110663 0.001265505 0.001301108 0.001309317 0.001422393 0.001539140 0.001716515 0.001798349 0.002164751 0.002311399 0.002787966 0.003056958 0.003330421 0.003705690 0.003811193 0.004065390 0.004539976 0.004870769 0.005115469 0.005432562 0.005874733 0.005914213 0.006175489 0.006767736 0.007039024 0.007312105 0.007883929 0.008159987 0.008714761 0.009366452 0.009622022 0.010300928 0.010892797 0.011002339 0.011743690 0.012915295 0.013121356 0.013557332 0.014492620 0.014600419 0.015365874 0.015621750 0.015715582 0.016389305 0.016450735 0.017816895 0.018274023 0.019387080 0.019876945 0.020248791 0.021408359 0.021855724 0.022649754 0.023255377 0.023307569 0.024388716 0.025764045 0.026129467 0.026393483 0.026792198 0.026955925 0.027882494 0.028502860 0.030062275 0.030454636 0.032205608 0.032681345 0.034129231 0.035214204 0.038654364 0.038950024 0.041059942 0.041612660 0.045258157 0.045332246 0.045763030 0.048312061 0.049642935 0.050030950 0.051516024 0.051802753 0.051884462 0.052282025 0.052372243 0.052622063 0.053205715 0.055066083 0.055792999 0.055936367 0.056529059 0.056904375 0.057185336 0.057921723 0.058657834 0.059232214 0.060389663 0.060827280 0.061625614 0.062636631 0.063970078 0.064686921 0.064889685 0.066145052 0.067304924 0.068004470 0.068676572 0.071327508 0.071655574 0.072380930 0.072837660 0.073914776 0.076583206 0.080101557 0.080992254 0.082658789 0.082934338 0.085939977 0.088035690 0.089033972 0.089639973 0.091211998 0.093177594 0.094304041 0.095336540 0.095864623 0.096762808 0.097873892 0.099647228 0.100112402 0.101288786 0.101976131 0.103061627 0.103354556 0.104346918 0.107578264 0.109601856 0.111119720 0.111597468 0.112298693 0.113395482 0.115025923 0.116186331 0.116569161 0.117444748 0.118342577 0.121649387 0.124286966 0.124944037 0.127676962 0.128044177 0.129732297 0.133356689 0.135627213 0.137016059 0.138381546 0.139243473 0.141528817 0.143358448 0.145325988 0.146129987 0.151360947 0.151501780 0.153116624 0.159250903 0.160466313 0.166428131 0.171062088 0.174662661 0.178221486 0.180950871 0.183623771 0.186743717 0.188217231 0.189839361 0.198453757 0.201887822 0.205419309 0.206222419 0.207157436 0.209088903 0.209803570 0.212388132 0.213206513 0.216013182 0.217594284 0.219424149 0.221823393 0.225161791 0.231703193 0.232769689 0.234471514 0.236819496 0.244074783 0.246972229 0.249674582 0.255298128 0.255842185 0.257106705 0.261914467 0.271430895 0.280739904 0.291401969 0.298441495 0.298961442 0.300561103 0.306461945 0.307523138 0.307787107 0.318127054 0.321071441 0.325538897 0.327863478 0.330985737 0.347142322 0.351191423 0.355389853 0.358403077 0.359375450 0.363921060 0.383455657 0.406222408 0.411521813 0.429916161 0.430377103 0.432042666 0.445956096 0.460987468 0.464749297 0.467740346 0.477889350 0.485115073 0.498059088 0.498714841 0.513524927 0.515518136 0.543090744 0.565495904 0.567246667 0.583895672 0.591550220 0.605565616 0.641121038 0.644884677 0.665643318 0.674620816 0.685250537 0.691755891 0.699294036 0.700853383 0.704248566 0.715828030 0.724871960 0.735546511 0.737841008 0.745427451 0.750714865 0.771597763 0.775930877 0.804911058 0.817601883 0.821248874 0.827411739 0.832944825 0.845185378 0.846498000 0.846942309 0.852833021 0.859292803 0.867366959 0.873976524 0.875348902 0.879725318 0.884666907 0.890912221 0.896015487 0.899887162 0.914234421 0.917160021 0.923008058 0.924382402 0.931697249 0.939155487 0.954619375 0.959231773 0.969269948 0.974593859 0.982092946 0.998492717 1.002978609 1.012736456 1.018601402 1.038900913 1.049137943 1.055334478 1.068625129 1.076504369 1.086989307 1.101800826 1.110226728 1.111427221 1.117734694 1.122489849 1.123488337 1.134643400 1.144951776 1.161345303 1.169916232 1.173886986 1.176376987 1.200549907 1.217746638 1.228203919 1.247343041 1.295381063 1.296127142 1.314346972 1.325467201 1.326352589 1.328288755 1.330162522 1.334614836 1.341069902 1.346166148 1.362451945 1.378810364 1.380926818 1.381495618 1.401486345 1.508753968 1.557850491 1.671891805 1.911319569</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">124</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9066614" y3="-0.95203371" z3="-0.6962947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5644113" y3="-1.95395056" z3="-1.60494528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04849387" y3="-0.99950138" z3="-1.46257123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74784852" y3="1.47587179" z3="-1.10302349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27980108" y3="0.31563273" z3="-0.5106585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62846688" y3="2.74134217" z3="-1.12157562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98846045" y3="2.73675236" z3="-0.8662751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38530748" y3="5.0001913" z3="-0.33755438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79537496" y3="3.85914167" z3="-0.82746403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76805754" y3="5.87699155" z3="-0.11891954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03916815" y3="1.6169628" z3="-1.62273568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1427018" y3="0.37229671" z3="0.24230958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70366682" y3="0.38650228" z3="-0.57252596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62422832" y3="0.72441155" z3="0.38826054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63737286" y3="-0.85471121" z3="-1.43441955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10622942" y3="-2.48572694" z3="-1.27376016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.22691568" y3="-5.50850956" z3="-6.1807085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.92006344" y3="-5.07339059" z3="-5.2252891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12149911" y3="-3.93045833" z3="-2.79944753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.8829626" y3="-3.69295387" z3="-5.07972332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58467901" y3="-5.89935227" z3="-4.14943098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20048741" y3="-5.32169119" z3="-2.94593553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49245172" y3="-3.08934335" z3="-3.8734016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.15067039" y3="-3.0261979" z3="-5.90311787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63704064" y3="-6.98720186" z3="-4.24053222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9794963" y3="-5.95456004" z3="-2.08215587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67917339" y3="-3.38173789" z3="-1.56886833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33703604" y3="-3.86929232" z3="-0.84880709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67389855" y3="-4.86966549" z3="-1.13214644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40882683" y3="-3.57637098" z3="0.59960693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.50752784" y3="-3.12523119" z3="3.36034502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.75656021" y3="-4.61359533" z3="1.47363136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12997262" y3="-2.30863237" z3="1.11886083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17609949" y3="-2.08549946" z3="2.49078392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.79724372" y3="-4.39025911" z3="2.84836504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9552175" y3="-5.61335883" z3="1.07888138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11150627" y3="-1.46689665" z3="0.46844609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05595874" y3="-1.08442296" z3="2.86442142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.03511756" y3="-5.21641489" z3="3.52306045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.53289602" y3="-2.95369323" z3="4.44036319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44882565" y3="-1.75372556" z3="-3.84733578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52991125" y3="-1.34402632" z3="-2.940513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32046138" y3="3.72604325" z3="-0.94327391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10392783" y3="-2.99680148" z3="-1.74470481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91945859" y3="-3.16630147" z3="-0.62182435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12745056" y3="-2.28848707" z3="0.30385981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83496433" y3="-0.71112421" z3="0.5521146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.60227198" y3="-0.18118892" z3="-1.0651031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52675567" y3="0.40671592" z3="1.23717151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16134187" y3="-1.04952801" z3="1.82935874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41930912" y3="-4.37340916" z3="-0.39672283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.16853875" y3="-4.6035498" z3="0.78671242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.86115256" y3="0.17743691" z3="-1.79676358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30395495" y3="0.65100666" z3="-0.8769074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.17293389" y3="-1.00607121" z3="-1.52837322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61733038" y3="0.52439064" z3="0.61929621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20164146" y3="0.03824781" z3="2.22673092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97537328" y3="1.4080073" z3="1.37511956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61811193" y3="-0.09615932" z3="2.15210977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96903088" y3="-1.68959066" z3="1.4330215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.73341418" y3="-1.54015053" z3="2.72059356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09898872" y3="-4.01152189" z3="0.77872401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.57634848" y3="-4.35393864" z3="1.68152141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.41004385" y3="-5.67556548" z3="0.77648995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28421032" y3="-2.18928143" z3="-0.15674226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14523171" y3="-3.30547115" z3="-0.99444487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5049231" y3="-4.45767974" z3="-0.55424482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00344706" y3="-4.48751672" z3="0.74122076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15403638" y3="-3.41258157" z3="1.61228101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79021696" y3="-2.26524488" z3="1.15575217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49889094" y3="-3.25499476" z3="-2.02750664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3669741" y3="-5.31209157" z3="-1.21709598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25553538" y3="-5.66297538" z3="1.18993789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74738661" y3="-3.47419592" z3="2.62267543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88603734" y3="-1.40689628" z3="1.82169837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47503477" y3="4.00341132" z3="0.17577059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.84963293" y3="3.80847657" z3="0.14344391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42617352" y3="3.34076575" z3="-1.03138013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6700365" y3="3.08606065" z3="-2.17428528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29418133" y3="3.27103179" z3="-2.11861597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00021477" y3="4.3316231" z3="1.10280005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47087269" y3="3.99324583" z3="1.02267268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86908631" y3="3.08696368" z3="-1.06600596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15987021" y3="2.73277448" z3="-3.08201743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.31485274" y3="3.04414939" z3="-2.99531575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14452319" y3="-5.84562466" z3="2.38121376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7706847" y3="-6.38325074" z3="0.33641265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39102476" y3="2.90894213" z3="-2.14506446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46257282" y3="3.04918326" z3="-0.00445556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56457584" y3="0.15341947" z3="-2.10871702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89219935" y3="1.40125181" z3="-1.9621399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71490636" y3="0.07332523" z3="-2.94136167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.16514065" y3="1.17258211" z3="-3.62945245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22830022" y3="-0.88859235" z3="-3.03475703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.04666641" y3="1.09835209" z3="-4.27220169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36656525" y3="2.51363339" z3="-2.71227448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47184029" y3="2.40220003" z3="-3.52114879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83593928" y3="3.46579947" z3="-2.64764697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.81482554" y3="3.26991195" z3="-4.09170827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58676391" y3="3.90792551" z3="-0.29431507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77785596" y3="5.06063959" z3="-0.07044875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95329118" y3="3.96059508" z3="0.10137381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49382125" y3="5.10656973" z3="0.63353408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57785994" y3="3.07280522" z3="-0.01516366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54658557" y3="5.12088643" z3="0.93020364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36893036" y3="6.23607568" z3="0.47016923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69927896" y3="6.26523213" z3="0.80847059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73771562" y3="7.11733694" z3="0.62346323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14279747" y3="7.17320405" z3="1.22659314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29548954" y3="-3.94573577" z3="-2.91102383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49692425" y3="-4.97845279" z3="-2.58862547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.14626702" y3="-3.6158902" z3="-3.5365976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40065566" y3="-3.94983961" z3="-3.55373378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64889543" y3="-1.61212763" z3="-2.1177746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37265112" y3="-1.13034696" z3="-2.80101145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48986918" y3="-0.95575777" z3="-1.24872938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69273763" y3="-1.66131164" z3="-2.66206946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9067,-.952,-.6963;6.5644,-1.954,-1.6049;6.0485,-.9995,-1.4626;4.7478,1.4759,-1.103;4.2798,.3156,-.5107;2.6285,2.7413,-1.1216;3.9885,2.7368,-.8663;2.3853,5.0002,-.3376;1.7954,3.8591,-.8275;1.7681,5.877,-.1189;2.0392,1.617,-1.6227;3.1427,.3723,.2423;1.7037,.3865,-.5725;.6242,.7244,.3883;1.6374,-.8547,-1.4344;1.1062,-2.4857,-1.2738;2.2269,-5.5085,-6.1807;1.9201,-5.0734,-5.2253;1.1215,-3.9305,-2.7994;1.883,-3.693,-5.0797;1.5847,-5.8994,-4.1494;1.2005,-5.3217,-2.9459;1.4925,-3.0893,-3.8734;2.1507,-3.0262,-5.9031;1.637,-6.9872,-4.2405;.9795,-5.9546,-2.0822;.6792,-3.3817,-1.5689;-.337,-3.8693,-.8488;-.6739,-4.8697,-1.1321;-.4088,-3.5764,.5996;-.5075,-3.1252,3.3603;-.7566,-4.6136,1.4736;-.13,-2.3086,1.1189;-.1761,-2.0855,2.4908;-.7972,-4.3903,2.8484;-.9552,-5.6134,1.0789;.1115,-1.4669,.4684;.056,-1.0844,2.8644;-1.0351,-5.2164,3.5231;-.5329,-2.9537,4.4404;1.4488,-1.7537,-3.8473;1.5299,-1.344,-2.9405;.3205,3.726,-.9433;-2.1039,-2.9968,-1.7447;-2.9195,-3.1663,-.6218;-3.1275,-2.2885,.3039;-3.835,-.7111,.5521;-4.6023,-.1812,-1.0651;-2.5268,.4067,1.2372;-5.1613,-1.0495,1.8294;-3.4193,-4.3734,-.3967;-4.1685,-4.6035,.7867;-3.8612,.1774,-1.7968;-5.304,.651,-.8769;-5.1729,-1.0061,-1.5284;-1.6173,.5244,.6193;-2.2016,.0382,2.2267;-2.9754,1.408,1.3751;-5.6181,-.0962,2.1521;-5.969,-1.6896,1.433;-4.7334,-1.5402,2.7206;-5.099,-4.0115,.7787;-3.5763,-4.3539,1.6815;-4.41,-5.6756,.7765;4.2842,-2.1893,-.1567;4.1452,-3.3055,-.9944;3.5049,-4.4577,-.5542;3.0034,-4.4875,.7412;3.154,-3.4126,1.6123;3.7902,-2.2652,1.1558;4.4989,-3.255,-2.0275;3.367,-5.3121,-1.2171;2.2555,-5.663,1.1899;2.7474,-3.4742,2.6227;3.886,-1.4069,1.8217;-.475,4.0034,.1758;-1.8496,3.8085,.1434;-2.4262,3.3408,-1.0314;-1.67,3.0861,-2.1743;-.2942,3.271,-2.1186;.0002,4.3316,1.1028;-2.4709,3.9932,1.0227;-3.8691,3.087,-1.066;-2.1599,2.7328,-3.082;.3149,3.0441,-2.9953;2.1445,-5.8456,2.3812;1.7707,-6.3833,.3364;-4.391,2.9089,-2.1451;-4.4626,3.0492,-.0045;6.5646,.1534,-2.1087;5.8922,1.4013,-1.9621;7.7149,.0733,-2.9414;8.1651,1.1726,-3.6295;8.2283,-.8886,-3.0348;9.0467,1.0984,-4.2722;6.3666,2.5136,-2.7123;7.4718,2.4022,-3.5211;5.8359,3.4658,-2.6476;7.8148,3.2699,-4.0917;4.5868,3.9079,-.2943;3.7779,5.0606,-.0704;5.9533,3.9606,.1014;6.4938,5.1066,.6335;6.5779,3.0728,-.0152;7.5466,5.1209,.9302;4.3689,6.2361,.4702;5.6993,6.2652,.8085;3.7377,7.1173,.6235;6.1428,7.1732,1.2266;-2.2955,-3.9457,-2.911;-2.4969,-4.9785,-2.5886;-3.1463,-3.6159,-3.5366;-1.4007,-3.9498,-3.5537;-1.6489,-1.6121,-2.1178;-2.3727,-1.1303,-2.801;-1.4899,-.9558,-1.2487;-.6927,-1.6613,-2.6621;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662800659677</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004026243007 0.000436786022 0.018570755745 0.005339598390</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056518038 -0.001343681 0.000141834 0.000254517 0.000328064 0.000396308 0.000401907 0.000509918 0.000559773 0.000643415 0.000769138 0.000850842 0.001051554 0.001112677 0.001266298 0.001301617 0.001312515 0.001423890 0.001541717 0.001724116 0.001806406 0.002167370 0.002313528 0.002832638 0.003061684 0.003334170 0.003709825 0.003817628 0.004078547 0.004547382 0.004870662 0.005115480 0.005475904 0.005902892 0.005928330 0.006349618 0.006773854 0.007038815 0.007316443 0.007888988 0.008160405 0.008716318 0.009392501 0.009630264 0.010314644 0.010908690 0.011005090 0.011743568 0.012913982 0.013127518 0.013557312 0.014496441 0.014603297 0.015366986 0.015628891 0.015716397 0.016390381 0.016450296 0.017818588 0.018290510 0.019433363 0.020069233 0.020263644 0.021408926 0.021855950 0.022649844 0.023255488 0.023307402 0.024394378 0.025766732 0.026128033 0.026399177 0.026817363 0.026957681 0.027884877 0.028529270 0.030064613 0.030454626 0.032279142 0.032695853 0.034147567 0.035248519 0.038665748 0.038952539 0.041066214 0.041639845 0.045298654 0.045345224 0.045849325 0.048321041 0.049644390 0.050035151 0.051516162 0.051808624 0.051886189 0.052282259 0.052372263 0.052623367 0.053222937 0.055075862 0.055795745 0.055974318 0.056529596 0.056908350 0.057189487 0.057926225 0.058657890 0.059232225 0.060402819 0.060829427 0.061637392 0.062636535 0.063971113 0.064707507 0.064889668 0.066147160 0.067317795 0.068033777 0.068685732 0.071484542 0.071669859 0.072380946 0.072838490 0.074083641 0.076585956 0.080103053 0.080998106 0.082659689 0.082950823 0.085945190 0.088061486 0.089034197 0.089640720 0.091214387 0.093177887 0.094304699 0.095336550 0.095873684 0.096762962 0.097888294 0.099646229 0.100118695 0.101291390 0.102012527 0.103061487 0.103354561 0.104347371 0.107593808 0.109629884 0.111124460 0.111624387 0.112325344 0.113398745 0.115083395 0.116201857 0.116569954 0.117447314 0.118375802 0.121652994 0.124295446 0.124948163 0.127684170 0.128044323 0.129737718 0.133356689 0.135639177 0.137021047 0.138383988 0.139243859 0.141540782 0.143360459 0.145361765 0.146130278 0.151403233 0.151519321 0.153120136 0.159265445 0.160470899 0.166452467 0.171084863 0.174669074 0.178271865 0.180988642 0.183641244 0.186745207 0.188224691 0.189882683 0.198455848 0.201888781 0.205421556 0.206243131 0.207158671 0.209091010 0.209820063 0.212397158 0.213206482 0.216055646 0.217689917 0.219538838 0.221822888 0.225176243 0.231703241 0.232769877 0.234481058 0.236962637 0.244178662 0.246976820 0.249675361 0.255309774 0.255848618 0.257117379 0.261915086 0.271431002 0.280824397 0.291426503 0.298549326 0.298965321 0.300586395 0.306479142 0.307533170 0.307795793 0.318126901 0.321086674 0.325661594 0.327864456 0.331068030 0.347150397 0.351202419 0.355406094 0.358582499 0.359375330 0.363921268 0.383460582 0.406222560 0.411565555 0.429916122 0.430401274 0.432082707 0.446008240 0.461003254 0.464770088 0.467798233 0.477889339 0.485128703 0.498060527 0.498735070 0.513528755 0.515533781 0.543099054 0.565496422 0.567247416 0.583895738 0.591554005 0.605569213 0.641122891 0.644890227 0.665643465 0.674621107 0.685250463 0.691779097 0.699371285 0.700889069 0.704248575 0.715867896 0.725056802 0.735546664 0.737842492 0.745878575 0.750715133 0.771598090 0.775930882 0.804942199 0.817608950 0.821250092 0.827412004 0.832945480 0.845187055 0.846497599 0.846942266 0.852840489 0.859294420 0.867367532 0.874040086 0.875510399 0.879728832 0.884773736 0.890912709 0.896022326 0.899899131 0.914268459 0.917216108 0.923046484 0.924382642 0.931697568 0.939207879 0.954620056 0.959231731 0.969270414 0.974616205 0.982099741 0.998494507 1.003062141 1.012736485 1.018608752 1.038902553 1.049138405 1.055334518 1.068628783 1.076506571 1.086989510 1.101870854 1.110228374 1.111437355 1.117736261 1.122489973 1.123488382 1.134645387 1.144957586 1.161354154 1.169918224 1.173911752 1.176382707 1.200549952 1.217881899 1.228500320 1.247343511 1.295384959 1.296138807 1.314359979 1.325481689 1.326355391 1.328353783 1.330162533 1.334615836 1.341074831 1.346185963 1.362461529 1.378810744 1.380929953 1.381507568 1.402578562 1.508764147 1.557852701 1.671893735 1.911337463</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">125</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90654585" y3="-0.95239508" z3="-0.6973967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56619463" y3="-1.9536005" z3="-1.60344302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05009531" y3="-0.99921812" z3="-1.46121323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74922019" y3="1.47597464" z3="-1.10152832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2795277" y3="0.31515771" z3="-0.5115893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6302627" y3="2.74166756" z3="-1.12339042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98961097" y3="2.73671374" z3="-0.86490799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38538591" y3="4.99917897" z3="-0.33674539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79638341" y3="3.85890236" z3="-0.82958175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76744647" y3="5.87568916" z3="-0.117458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04234794" y3="1.61779125" z3="-1.62733211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14084177" y3="0.37119195" z3="0.23909304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70351598" y3="0.38695779" z3="-0.57872488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6224376" y3="0.72573713" z3="0.37994351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63809129" y3="-0.85385984" z3="-1.44113055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10492749" y3="-2.48429529" z3="-1.27780671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.21305526" y3="-5.50879606" z3="-6.1863095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90877657" y3="-5.0733977" z3="-5.23019862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11716123" y3="-3.93014247" z3="-2.80236525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.87081505" y3="-3.69289459" z3="-5.08518081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57744537" y3="-5.8990996" z3="-4.15295987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19677982" y3="-5.32131155" z3="-2.94849089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48338578" y3="-3.08919391" z3="-3.8779801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.13539619" y3="-3.02639758" z3="-5.90976613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63016666" y3="-6.98691958" z3="-4.24375646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97890179" y3="-5.95398206" z3="-2.08383926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6782325" y3="-3.38142527" z3="-1.57062972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33626011" y3="-3.86870472" z3="-0.84840951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6723043" y3="-4.87031188" z3="-1.12929319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40624443" y3="-3.57324143" z3="0.59976912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.50075337" y3="-3.11651083" z3="3.36003997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74942206" y3="-4.61019246" z3="1.47686783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12983106" y3="-2.30316945" z3="1.11590272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1736546" y3="-2.07740711" z3="2.48750863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.78804175" y3="-4.38404092" z3="2.85134536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.94411962" y3="-5.61369269" z3="1.08550638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10975719" y3="-1.46269794" z3="0.46409449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05781147" y3="-1.07553583" z3="2.85891865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.02161083" y3="-5.21024609" z3="3.52863279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.52391449" y3="-2.94315863" z3="4.43987977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4373543" y3="-1.75353266" z3="-3.85205838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52599513" y3="-1.34367165" z3="-2.94700304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32156974" y3="3.72582803" z3="-0.94809374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10582858" y3="-2.999635" z3="-1.74192028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9189758" y3="-3.1680394" z3="-0.61748835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12661071" y3="-2.2877146" z3="0.30622787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83480298" y3="-0.71273456" z3="0.55368157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.607443" y3="-0.18679629" z3="-1.06230655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.528516" y3="0.41254808" z3="1.2359264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15390194" y3="-1.04900851" z3="1.83639937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41727132" y3="-4.37464633" z3="-0.38918395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.16363291" y3="-4.60396424" z3="0.79646476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.86893648" y3="0.16851102" z3="-1.7981543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30861889" y3="0.64735044" z3="-0.87505771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.18185018" y3="-1.01235725" z3="-1.52200012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62149082" y3="0.5281426" z3="0.61461178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19808496" y3="0.0556746" z3="2.22591627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98659697" y3="1.40921393" z3="1.37229328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61361111" y3="-0.09747159" z3="2.15969532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96074514" y3="-1.69307612" z3="1.44393747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.72238923" y3="-1.53551919" z3="2.72998824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.09246464" y3="-4.01118928" z3="0.79284195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56895183" y3="-4.35669401" z3="1.68858985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40717101" y3="-5.67387347" z3="0.78595858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28313999" y3="-2.1901132" z3="-0.16002869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14524088" y3="-3.30548388" z3="-0.9989807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50507345" y3="-4.45837149" z3="-0.56043172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00289568" y3="-4.48976372" z3="0.73475691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15187185" y3="-3.41544538" z3="1.60684897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78767314" y3="-2.26731443" z3="1.15183363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49985323" y3="-3.25379043" z3="-2.031659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36791402" y3="-5.31216614" z3="-1.22425015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25609848" y3="-5.66643617" z3="1.18220003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74430427" y3="-3.47815142" z3="2.61683345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88218586" y3="-1.40933659" z3="1.81848295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47613003" y3="4.00373106" z3="0.17000681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85090182" y3="3.80977278" z3="0.13335573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4260382" y3="3.34244995" z3="-1.04490967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66573456" y3="3.08253427" z3="-2.18096251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29056796" y3="3.26940904" z3="-2.12428411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00175095" y3="4.33155979" z3="1.09882456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47609405" y3="3.99994253" z3="1.00410192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86650256" y3="3.08254003" z3="-1.07725375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15481633" y3="2.7289395" z3="-3.09046774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32040323" y3="3.04152021" z3="-2.99936669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14642189" y3="-5.85129595" z3="2.37333706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77080614" y3="-6.3855649" z3="0.32791757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38497228" y3="2.89953201" z3="-2.15777805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46309521" y3="3.04770101" z3="-0.01742213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56804648" y3="0.15439476" z3="-2.10460402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89557327" y3="1.40219258" z3="-1.95810397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72069322" y3="0.07519228" z3="-2.93415153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.17323598" y3="1.17535827" z3="-3.61926341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23414773" y3="-0.8867047" z3="-3.02738898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0567333" y3="1.10190716" z3="-4.25937353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37215364" y3="2.51542821" z3="-2.70563102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47980211" y3="2.40490914" z3="-3.51142871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84142504" y3="3.46751227" z3="-2.64159418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.82468637" y3="3.27335715" z3="-4.07973912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58685979" y3="3.90700807" z3="-0.29004065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7774185" y3="5.05918704" z3="-0.06653689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95232966" y3="3.95932707" z3="0.10892149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49120464" y3="5.10446878" z3="0.64437022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57735327" y3="3.07197301" z3="-0.00753391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54300242" y3="5.11861571" z3="0.94368924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36711662" y3="6.23374769" z3="0.47717296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69622079" y3="6.2626172" z3="0.81911316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73558949" y3="7.1142874" z3="0.62939956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13861378" y3="7.16987173" z3="1.23981735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29988151" y3="-3.94956758" z3="-2.90649345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50068974" y3="-4.98181092" z3="-2.581664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15193379" y3="-3.62045388" z3="-3.5305371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40640267" y3="-3.95454257" z3="-3.55101059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65342579" y3="-1.61489137" z3="-2.11939891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37847379" y3="-1.13495071" z3="-2.7999036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49567995" y3="-0.95277594" z3="-1.25133627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.6977219" y3="-1.66385742" z3="-2.66483501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9065,-.9524,-.6974;6.5662,-1.9536,-1.6034;6.0501,-.9992,-1.4612;4.7492,1.476,-1.1015;4.2795,.3152,-.5116;2.6303,2.7417,-1.1234;3.9896,2.7367,-.8649;2.3854,4.9992,-.3367;1.7964,3.8589,-.8296;1.7674,5.8757,-.1175;2.0423,1.6178,-1.6273;3.1408,.3712,.2391;1.7035,.387,-.5787;.6224,.7257,.3799;1.6381,-.8539,-1.4411;1.1049,-2.4843,-1.2778;2.2131,-5.5088,-6.1863;1.9088,-5.0734,-5.2302;1.1172,-3.9301,-2.8024;1.8708,-3.6929,-5.0852;1.5774,-5.8991,-4.153;1.1968,-5.3213,-2.9485;1.4834,-3.0892,-3.878;2.1354,-3.0264,-5.9098;1.6302,-6.9869,-4.2438;.9789,-5.954,-2.0838;.6782,-3.3814,-1.5706;-.3363,-3.8687,-.8484;-.6723,-4.8703,-1.1293;-.4062,-3.5732,.5998;-.5008,-3.1165,3.36;-.7494,-4.6102,1.4769;-.1298,-2.3032,1.1159;-.1737,-2.0774,2.4875;-.788,-4.384,2.8513;-.9441,-5.6137,1.0855;.1098,-1.4627,.4641;.0578,-1.0755,2.8589;-1.0216,-5.2102,3.5286;-.5239,-2.9432,4.4399;1.4374,-1.7535,-3.8521;1.526,-1.3437,-2.947;.3216,3.7258,-.9481;-2.1058,-2.9996,-1.7419;-2.919,-3.168,-.6175;-3.1266,-2.2877,.3062;-3.8348,-.7127,.5537;-4.6074,-.1868,-1.0623;-2.5285,.4125,1.2359;-5.1539,-1.049,1.8364;-3.4173,-4.3746,-.3892;-4.1636,-4.604,.7965;-3.8689,.1685,-1.7982;-5.3086,.6474,-.8751;-5.1819,-1.0124,-1.522;-1.6215,.5281,.6146;-2.1981,.0557,2.2259;-2.9866,1.4092,1.3723;-5.6136,-.0975,2.1597;-5.9607,-1.6931,1.4439;-4.7224,-1.5355,2.73;-5.0925,-4.0112,.7928;-3.569,-4.3567,1.6886;-4.4072,-5.6739,.786;4.2831,-2.1901,-.16;4.1452,-3.3055,-.999;3.5051,-4.4584,-.5604;3.0029,-4.4898,.7348;3.1519,-3.4154,1.6068;3.7877,-2.2673,1.1518;4.4999,-3.2538,-2.0317;3.3679,-5.3122,-1.2243;2.2561,-5.6664,1.1822;2.7443,-3.4782,2.6168;3.8822,-1.4093,1.8185;-.4761,4.0037,.17;-1.8509,3.8098,.1334;-2.426,3.3424,-1.0449;-1.6657,3.0825,-2.181;-.2906,3.2694,-2.1243;-.0018,4.3316,1.0988;-2.4761,3.9999,1.0041;-3.8665,3.0825,-1.0773;-2.1548,2.7289,-3.0905;.3204,3.0415,-2.9994;2.1464,-5.8513,2.3733;1.7708,-6.3856,.3279;-4.385,2.8995,-2.1578;-4.4631,3.0477,-.0174;6.568,.1544,-2.1046;5.8956,1.4022,-1.9581;7.7207,.0752,-2.9342;8.1732,1.1754,-3.6193;8.2341,-.8867,-3.0274;9.0567,1.1019,-4.2594;6.3722,2.5154,-2.7056;7.4798,2.4049,-3.5114;5.8414,3.4675,-2.6416;7.8247,3.2734,-4.0797;4.5869,3.907,-.29;3.7774,5.0592,-.0665;5.9523,3.9593,.1089;6.4912,5.1045,.6444;6.5774,3.072,-.0075;7.543,5.1186,.9437;4.3671,6.2337,.4772;5.6962,6.2626,.8191;3.7356,7.1143,.6294;6.1386,7.1699,1.2398;-2.2999,-3.9496,-2.9065;-2.5007,-4.9818,-2.5817;-3.1519,-3.6205,-3.5305;-1.4064,-3.9545,-3.551;-1.6534,-1.6149,-2.1194;-2.3785,-1.135,-2.7999;-1.4957,-.9528,-1.2513;-.6977,-1.6639,-2.6648;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662810423521</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005403000929 0.000522135798 0.016820528039 0.005335843412</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056517663 -0.001595006 0.000141864 0.000256133 0.000328372 0.000396289 0.000401854 0.000509917 0.000559786 0.000644726 0.000769152 0.000863592 0.001053109 0.001112761 0.001269032 0.001308271 0.001313975 0.001439298 0.001542572 0.001723996 0.001807066 0.002168325 0.002317760 0.002852213 0.003063335 0.003333710 0.003715084 0.003824272 0.004080701 0.004547152 0.004870678 0.005117084 0.005484202 0.005914956 0.005934721 0.006473500 0.006773288 0.007043680 0.007326604 0.007893087 0.008160544 0.008716141 0.009417211 0.009649081 0.010352765 0.010908637 0.011003898 0.011746949 0.012918697 0.013138646 0.013561242 0.014496736 0.014607536 0.015367541 0.015629670 0.015716571 0.016390684 0.016450133 0.017819499 0.018300828 0.019479280 0.020160452 0.020298863 0.021412454 0.021858368 0.022649883 0.023258596 0.023322747 0.024406770 0.025776267 0.026140219 0.026411661 0.026840296 0.026970080 0.027885498 0.028547615 0.030068557 0.030454739 0.032302431 0.032714240 0.034192868 0.035288094 0.038686089 0.038961808 0.041068983 0.041665544 0.045315601 0.045373022 0.045977906 0.048343770 0.049644414 0.050035259 0.051516950 0.051817588 0.051905048 0.052282467 0.052372352 0.052626618 0.053245998 0.055075057 0.055809148 0.056009976 0.056531480 0.056913755 0.057192643 0.057936356 0.058657915 0.059232222 0.060401937 0.060829158 0.061637516 0.062638013 0.063971716 0.064722526 0.064889773 0.066151953 0.067338578 0.068082472 0.068697882 0.071582038 0.071691879 0.072381504 0.072838487 0.074494433 0.076587004 0.080104211 0.081004517 0.082662872 0.082967772 0.085947997 0.088098969 0.089034276 0.089641581 0.091216143 0.093178168 0.094304720 0.095336952 0.095886569 0.096763083 0.097904010 0.099654283 0.100144236 0.101294244 0.102043424 0.103061181 0.103355208 0.104347246 0.107630866 0.109651388 0.111134794 0.111643136 0.112351056 0.113398537 0.115156984 0.116233434 0.116572191 0.117463694 0.118405011 0.121652689 0.124326206 0.124948517 0.127684587 0.128044336 0.129738005 0.133356703 0.135659894 0.137027160 0.138383754 0.139244662 0.141549636 0.143365980 0.145390589 0.146130769 0.151434431 0.151551584 0.153120822 0.159267546 0.160483399 0.166462830 0.171095240 0.174672685 0.178314829 0.181009670 0.183644831 0.186744723 0.188229404 0.189926754 0.198461931 0.201888756 0.205425889 0.206276649 0.207160515 0.209095454 0.209888996 0.212401906 0.213207280 0.216094152 0.217765556 0.219667465 0.221834958 0.225190141 0.231704001 0.232769879 0.234491050 0.237120621 0.244237577 0.246997200 0.249694922 0.255329153 0.255865725 0.257124782 0.261915344 0.271432496 0.280946026 0.291459041 0.298678616 0.298981577 0.300607933 0.306481093 0.307565967 0.307818226 0.318132175 0.321091181 0.325785542 0.327865015 0.331254510 0.347154097 0.351212386 0.355419346 0.358739840 0.359375446 0.363922840 0.383482450 0.406229227 0.411565513 0.429916257 0.430401202 0.432096887 0.446048416 0.461091423 0.464791461 0.467936264 0.477889462 0.485139823 0.498061048 0.498805048 0.513529920 0.515568520 0.543101522 0.565496515 0.567247597 0.583899468 0.591565205 0.605570274 0.641149888 0.644896599 0.665644443 0.674625602 0.685284474 0.691803227 0.699429142 0.700937822 0.704248593 0.715883404 0.725280192 0.735547099 0.737842897 0.746225920 0.750715655 0.771598294 0.775931312 0.805019853 0.817611731 0.821257968 0.827470846 0.832952329 0.845214825 0.846553687 0.846949157 0.852849148 0.859306271 0.867367539 0.874062389 0.875740256 0.879750891 0.884894712 0.890917140 0.896037459 0.899916624 0.914336920 0.917267880 0.923090760 0.924382652 0.931697727 0.939241625 0.954627897 0.959232763 0.969270569 0.974633744 0.982104659 0.998495892 1.003131044 1.012742218 1.018609785 1.038904396 1.049138964 1.055334670 1.068644971 1.076506544 1.086989614 1.101969743 1.110228827 1.111443097 1.117750294 1.122490046 1.123488431 1.134651851 1.144958315 1.161360420 1.169918837 1.173918055 1.176387031 1.200549955 1.218044245 1.228677681 1.247343830 1.295390684 1.296152050 1.314375604 1.325503243 1.326358656 1.328450338 1.330162840 1.334618174 1.341082903 1.346195194 1.362472246 1.378811600 1.380929953 1.381509401 1.404314341 1.508790719 1.557853559 1.671894133 1.911483176</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">126</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9062149" y3="-0.95286186" z3="-0.69797542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56748509" y3="-1.95348474" z3="-1.60182003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05148118" y3="-0.99907151" z3="-1.45924418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75061243" y3="1.47613451" z3="-1.09889518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27913666" y3="0.31459771" z3="-0.51179879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63204791" y3="2.74216037" z3="-1.12539708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99060164" y3="2.7367187" z3="-0.86300149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38583671" y3="4.99900026" z3="-0.33818338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79761943" y3="3.85926781" z3="-0.83309785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76783725" y3="5.87538639" z3="-0.12056526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04541722" y3="1.61866813" z3="-1.63167496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13879219" y3="0.36979786" z3="0.23632856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70285291" y3="0.38815353" z3="-0.58405158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62064046" y3="0.72857768" z3="0.37277087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6366779" y3="-0.85241063" z3="-1.44692301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10403073" y3="-2.48323783" z3="-1.28147343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.19891274" y3="-5.50930084" z3="-6.19249982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.89758704" y3="-5.07365802" z3="-5.23559912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11278383" y3="-3.92928661" z3="-2.80589292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.8597596" y3="-3.69321517" z3="-5.09117931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57002509" y3="-5.89890978" z3="-4.15679358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19250307" y3="-5.32053498" z3="-2.95154346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47638506" y3="-3.08898729" z3="-3.88295896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.12132458" y3="-3.02684426" z3="-5.91682221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6230937" y3="-6.98676294" z3="-4.24714591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97719139" y3="-5.95287182" z3="-2.08599627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67597124" y3="-3.3795625" z3="-1.57362255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33665346" y3="-3.86675181" z3="-0.8484482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6726906" y3="-4.86870468" z3="-1.12739377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40320528" y3="-3.56988652" z3="0.5995188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49206002" y3="-3.10965071" z3="3.35928994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74149788" y3="-4.60632911" z3="1.47884148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12819167" y3="-2.2989256" z3="1.11322936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16936859" y3="-2.0711093" z3="2.48452269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77735742" y3="-4.37830991" z3="2.8530774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93590435" y3="-5.609296" z3="1.08892881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10639197" y3="-1.45808831" z3="0.45889431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05979387" y3="-1.06748272" z3="2.85351061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00784536" y3="-5.20373731" z3="3.53175382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51386751" y3="-2.93427264" z3="4.43882427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43177943" y3="-1.75351571" z3="-3.85854779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51669858" y3="-1.34212763" z3="-2.95166024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32297379" y3="3.72658438" z3="-0.95484031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10870121" y3="-3.00000004" z3="-1.73967819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9192289" y3="-3.16732268" z3="-0.6130369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12461212" y3="-2.28688569" z3="0.31060782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83534946" y3="-0.71123541" z3="0.55658586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.61484798" y3="-0.19231706" z3="-1.057039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52769171" y3="0.41591995" z3="1.23082649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15178803" y3="-1.04901181" z3="1.84413242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41644844" y3="-4.3738919" z3="-0.38216596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15832202" y3="-4.60256375" z3="0.80644119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.87870417" y3="0.1576426" z3="-1.79774113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31240047" y3="0.64438653" z3="-0.87104317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.19228264" y3="-1.01853004" z3="-1.50856723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62120569" y3="0.53382125" z3="0.60854075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19703914" y3="0.05447545" z3="2.22190324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98040868" y3="1.41593948" z3="1.36504477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61088974" y3="-0.09703707" z3="2.16677526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95883847" y3="-1.69484751" z3="1.45523529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.71618417" y3="-1.5333777" z3="2.735775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08957337" y3="-4.01236253" z3="0.80298127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.56085398" y3="-4.34925881" z3="1.69676677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39806501" y3="-5.67502901" z3="0.80104976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28168" y3="-2.19104066" z3="-0.16308786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1445779" y3="-3.30544406" z3="-1.0034456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50477831" y3="-4.45918537" z3="-0.56646418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00242881" y3="-4.49242023" z3="0.72862267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15003656" y3="-3.41884182" z3="1.60184001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78519841" y3="-2.26977269" z3="1.14827592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49988446" y3="-3.25243574" z3="-2.03581646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36826373" y3="-5.31233823" z3="-1.23132558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25702407" y3="-5.67035983" z3="1.17489054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74189126" y3="-3.48282677" z3="2.61151332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87873251" y3="-1.4123678" z3="1.81575637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47734521" y3="4.00673875" z3="0.16046453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85194113" y3="3.81141085" z3="0.12225263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42245172" y3="3.33659269" z3="-1.05119115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66178805" y3="3.07956211" z3="-2.19076535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28655999" y3="3.26745861" z3="-2.1310264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00663855" y3="4.33847798" z3="1.08815689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47730916" y3="3.99917075" z3="0.99765228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86509075" y3="3.07972549" z3="-1.09085718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14688585" y3="2.72073708" z3="-3.09782872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3259866" y3="3.03908721" z3="-3.00536769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.14950099" y3="-5.85790032" z3="2.36585161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77050247" y3="-6.38780552" z3="0.31990511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38172187" y3="2.89039043" z3="-2.17011026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46302561" y3="3.04961485" z3="-0.03117493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57143857" y3="0.15531897" z3="-2.0996082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89910202" y3="1.40320521" z3="-1.95266258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72597086" y3="0.07683538" z3="-2.92680402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18043928" y3="1.1777602" z3="-3.60949147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23931976" y3="-0.88513822" z3="-3.02038167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.06531224" y3="1.10481107" z3="-4.24803608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37783728" y3="2.51735943" z3="-2.69744047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.48718901" y3="2.40746883" z3="-3.50125127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84730274" y3="3.46963114" z3="-2.63299594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.8335779" y3="3.27652342" z3="-4.06777109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58636801" y3="3.90629826" z3="-0.28524362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77681331" y3="5.05853402" z3="-0.06369276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.95020481" y3="3.95786119" z3="0.11868576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4876441" y3="5.10234902" z3="0.65702292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57507997" y3="3.07041909" z3="0.0038958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53809509" y3="5.11590329" z3="0.96050977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36516511" y3="6.23254971" z3="0.48253683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69292367" y3="6.26066662" z3="0.82933967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73370743" y3="7.11336312" z3="0.63299017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13417977" y3="7.16745074" z3="1.25221293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30359757" y3="-3.95432548" z3="-2.90160492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.49864007" y3="-4.98732751" z3="-2.57291604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16034925" y3="-3.63115394" z3="-3.52441772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41243521" y3="-3.95733218" z3="-3.5491563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65828289" y3="-1.61548936" z3="-2.11899256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38501894" y3="-1.13832091" z3="-2.80300804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49817912" y3="-0.95627925" z3="-1.25312014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70261483" y3="-1.6648759" z3="-2.66519789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9062,-.9529,-.698;6.5675,-1.9535,-1.6018;6.0515,-.9991,-1.4592;4.7506,1.4761,-1.0989;4.2791,.3146,-.5118;2.632,2.7422,-1.1254;3.9906,2.7367,-.863;2.3858,4.999,-.3382;1.7976,3.8593,-.8331;1.7678,5.8754,-.1206;2.0454,1.6187,-1.6317;3.1388,.3698,.2363;1.7029,.3882,-.5841;.6206,.7286,.3728;1.6367,-.8524,-1.4469;1.104,-2.4832,-1.2815;2.1989,-5.5093,-6.1925;1.8976,-5.0737,-5.2356;1.1128,-3.9293,-2.8059;1.8598,-3.6932,-5.0912;1.57,-5.8989,-4.1568;1.1925,-5.3205,-2.9515;1.4764,-3.089,-3.883;2.1213,-3.0268,-5.9168;1.6231,-6.9868,-4.2471;.9772,-5.9529,-2.086;.676,-3.3796,-1.5736;-.3367,-3.8668,-.8484;-.6727,-4.8687,-1.1274;-.4032,-3.5699,.5995;-.4921,-3.1097,3.3593;-.7415,-4.6063,1.4788;-.1282,-2.2989,1.1132;-.1694,-2.0711,2.4845;-.7774,-4.3783,2.8531;-.9359,-5.6093,1.0889;.1064,-1.4581,.4589;.0598,-1.0675,2.8535;-1.0078,-5.2037,3.5318;-.5139,-2.9343,4.4388;1.4318,-1.7535,-3.8585;1.5167,-1.3421,-2.9517;.323,3.7266,-.9548;-2.1087,-3,-1.7397;-2.9192,-3.1673,-.613;-3.1246,-2.2869,.3106;-3.8353,-.7112,.5566;-4.6148,-.1923,-1.057;-2.5277,.4159,1.2308;-5.1518,-1.049,1.8441;-3.4164,-4.3739,-.3822;-4.1583,-4.6026,.8064;-3.8787,.1576,-1.7977;-5.3124,.6444,-.871;-5.1923,-1.0185,-1.5086;-1.6212,.5338,.6085;-2.197,.0545,2.2219;-2.9804,1.4159,1.365;-5.6109,-.097,2.1668;-5.9588,-1.6948,1.4552;-4.7162,-1.5334,2.7358;-5.0896,-4.0124,.803;-3.5609,-4.3493,1.6968;-4.3981,-5.675,.801;4.2817,-2.191,-.1631;4.1446,-3.3054,-1.0034;3.5048,-4.4592,-.5665;3.0024,-4.4924,.7286;3.15,-3.4188,1.6018;3.7852,-2.2698,1.1483;4.4999,-3.2524,-2.0358;3.3683,-5.3123,-1.2313;2.257,-5.6704,1.1749;2.7419,-3.4828,2.6115;3.8787,-1.4124,1.8158;-.4773,4.0067,.1605;-1.8519,3.8114,.1223;-2.4225,3.3366,-1.0512;-1.6618,3.0796,-2.1908;-.2866,3.2675,-2.131;-.0066,4.3385,1.0882;-2.4773,3.9992,.9977;-3.8651,3.0797,-1.0909;-2.1469,2.7207,-3.0978;.326,3.0391,-3.0054;2.1495,-5.8579,2.3659;1.7705,-6.3878,.3199;-4.3817,2.8904,-2.1701;-4.463,3.0496,-.0312;6.5714,.1553,-2.0996;5.8991,1.4032,-1.9527;7.726,.0768,-2.9268;8.1804,1.1778,-3.6095;8.2393,-.8851,-3.0204;9.0653,1.1048,-4.248;6.3778,2.5174,-2.6974;7.4872,2.4075,-3.5013;5.8473,3.4696,-2.633;7.8336,3.2765,-4.0678;4.5864,3.9063,-.2852;3.7768,5.0585,-.0637;5.9502,3.9579,.1187;6.4876,5.1023,.657;6.5751,3.0704,.0039;7.5381,5.1159,.9605;4.3652,6.2325,.4825;5.6929,6.2607,.8293;3.7337,7.1134,.633;6.1342,7.1675,1.2522;-2.3036,-3.9543,-2.9016;-2.4986,-4.9873,-2.5729;-3.1603,-3.6312,-3.5244;-1.4124,-3.9573,-3.5492;-1.6583,-1.6155,-2.119;-2.385,-1.1383,-2.803;-1.4982,-.9563,-1.2531;-.7026,-1.6649,-2.6652;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662818986521</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006735696680 0.000630093789 0.016062540654 0.005339081567</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056520293 -0.001974525 0.000145488 0.000256214 0.000329844 0.000396403 0.000402007 0.000513261 0.000559838 0.000644962 0.000769668 0.000871163 0.001053555 0.001112813 0.001269290 0.001311654 0.001321895 0.001466484 0.001550376 0.001736734 0.001812404 0.002168445 0.002324135 0.002852373 0.003063272 0.003337798 0.003716121 0.003824476 0.004081117 0.004551933 0.004870631 0.005117585 0.005484190 0.005923834 0.005938266 0.006501149 0.006774353 0.007063879 0.007340842 0.007892558 0.008160843 0.008719573 0.009428012 0.009670886 0.010396150 0.010911946 0.011003715 0.011763895 0.012951675 0.013157414 0.013585499 0.014500703 0.014622071 0.015368862 0.015629798 0.015716657 0.016390731 0.016462562 0.017820915 0.018303717 0.019518060 0.020169450 0.020313346 0.021416548 0.021866940 0.022649920 0.023271610 0.023358091 0.024415463 0.025786887 0.026161176 0.026428486 0.026847912 0.026990350 0.027885528 0.028553050 0.030072495 0.030455554 0.032304129 0.032729711 0.034245473 0.035320895 0.038700486 0.038970516 0.041068730 0.041684223 0.045322311 0.045408704 0.046061100 0.048371780 0.049644642 0.050047304 0.051517953 0.051821608 0.051933246 0.052282508 0.052373344 0.052627907 0.053260462 0.055083886 0.055827369 0.056038219 0.056534221 0.056918579 0.057195606 0.057944547 0.058658967 0.059232539 0.060403787 0.060834520 0.061640583 0.062645189 0.063972333 0.064726385 0.064891793 0.066159706 0.067352402 0.068145057 0.068706758 0.071617012 0.071709467 0.072381567 0.072839014 0.074831289 0.076587356 0.080105203 0.081007569 0.082668119 0.082985609 0.085953037 0.088119998 0.089035057 0.089641746 0.091216248 0.093179961 0.094304692 0.095337545 0.095896727 0.096764027 0.097911063 0.099682033 0.100181995 0.101297107 0.102063784 0.103061514 0.103360851 0.104347880 0.107678371 0.109671099 0.111160615 0.111652504 0.112363495 0.113400480 0.115245349 0.116284149 0.116600683 0.117529329 0.118410856 0.121653713 0.124360009 0.124951340 0.127692190 0.128044488 0.129739277 0.133356780 0.135673055 0.137026912 0.138385821 0.139244975 0.141549823 0.143375336 0.145405589 0.146130817 0.151445800 0.151611526 0.153125489 0.159268109 0.160492686 0.166462359 0.171095899 0.174672107 0.178339543 0.181016141 0.183646504 0.186750520 0.188230721 0.189957847 0.198464765 0.201890677 0.205434028 0.206324336 0.207162680 0.209101089 0.210079950 0.212403496 0.213209035 0.216109546 0.217811276 0.219814086 0.221916215 0.225205473 0.231707786 0.232771093 0.234506052 0.237310395 0.244341687 0.247005119 0.249738213 0.255352053 0.255906625 0.257128733 0.261915495 0.271434587 0.281121493 0.291506597 0.298801882 0.299052600 0.300616736 0.306484795 0.307617064 0.307894045 0.318150121 0.321091069 0.325897486 0.327865672 0.331612774 0.347157064 0.351223545 0.355433789 0.358774059 0.359377464 0.363925825 0.383536503 0.406249449 0.411567523 0.429916383 0.430465051 0.432100646 0.446055211 0.461309112 0.464809728 0.468195423 0.477889459 0.485148831 0.498061187 0.498963131 0.513530589 0.515613905 0.543101539 0.565496827 0.567247619 0.583911462 0.591581321 0.605570318 0.641184753 0.644902895 0.665645532 0.674635290 0.685329648 0.691811689 0.699488017 0.700937805 0.704248601 0.715885344 0.725503991 0.735567357 0.737848601 0.746349941 0.750716621 0.771598316 0.775932906 0.805123983 0.817612982 0.821272296 0.827581162 0.832975088 0.845275781 0.846661883 0.846998989 0.852858942 0.859330134 0.867367820 0.874064972 0.876006618 0.879837679 0.885054856 0.890922645 0.896166712 0.899953406 0.914431221 0.917286445 0.923137003 0.924382743 0.931697998 0.939261546 0.954642517 0.959238244 0.969273164 0.974692395 0.982107974 0.998496223 1.003232187 1.012750765 1.018609835 1.038905030 1.049140366 1.055334676 1.068661714 1.076507408 1.086989771 1.102093670 1.110229018 1.111448308 1.117767889 1.122491270 1.123489773 1.134659652 1.144964906 1.161362934 1.169918828 1.173918167 1.176389315 1.200549987 1.218172025 1.228799949 1.247344782 1.295398108 1.296164151 1.314393841 1.325620501 1.326362826 1.328610402 1.330162945 1.334621315 1.341086153 1.346195728 1.362483591 1.378811669 1.380930384 1.381510611 1.406668157 1.508845607 1.557854070 1.671895115 1.911750524</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">127</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9057821" y3="-0.95297218" z3="-0.69831916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56880267" y3="-1.95306172" z3="-1.59931481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05271269" y3="-0.99867734" z3="-1.45708082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75166865" y3="1.47643282" z3="-1.09714063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27855259" y3="0.31439961" z3="-0.51230691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63336504" y3="2.74295146" z3="-1.12771979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99125106" y3="2.73699527" z3="-0.86181047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38496715" y3="4.99929255" z3="-0.33822721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79822015" y3="3.86002542" z3="-0.8362977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7664067" y3="5.87580747" z3="-0.12094824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04819859" y3="1.61976837" z3="-1.63649133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13655514" y3="0.36904428" z3="0.23333793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70261027" y3="0.38871529" z3="-0.59028498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61878447" y3="0.72984713" z3="0.36454356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6379388" y3="-0.85144089" z3="-1.45361607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10254124" y3="-2.48088804" z3="-1.28651993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.18499613" y3="-5.50924267" z3="-6.19870227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.88624132" y3="-5.07318117" z3="-5.24112475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10811813" y3="-3.92840346" z3="-2.80963023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.84786375" y3="-3.69253055" z3="-5.09716809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56226897" y3="-5.89816844" z3="-4.16110491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18818962" y3="-5.31964784" z3="-2.95488997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.46713905" y3="-3.08808603" z3="-3.88818718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.10674033" y3="-3.02660706" z3="-5.92404775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61544639" y3="-6.98604705" z3="-4.25119516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97569526" y3="-5.95180858" z3="-2.08854284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.674977" y3="-3.37872331" z3="-1.57623675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33548562" y3="-3.8664321" z3="-0.84829935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6711151" y3="-4.86912299" z3="-1.12533266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3994235" y3="-3.56730609" z3="0.59936694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.48343631" y3="-3.10329057" z3="3.35855475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73568032" y3="-4.60218168" z3="1.48051647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12531942" y3="-2.29518641" z3="1.1107518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16365397" y3="-2.06582497" z3="2.48186212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.76910772" y3="-4.37241142" z3="2.85446388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92990748" y3="-5.60601399" z3="1.09217212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10755998" y3="-1.45569592" z3="0.45539271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06596245" y3="-1.06239791" z3="2.84943083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.99773349" y3="-5.19691466" z3="3.5346567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50269038" y3="-2.92703665" z3="4.43794628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41949217" y3="-1.75234556" z3="-3.86286273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51503738" y3="-1.3423097" z3="-2.95893265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3241204" y3="3.72682644" z3="-0.96131636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11027063" y3="-3.00330128" z3="-1.73598222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91771943" y3="-3.16930941" z3="-0.60675331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12264377" y3="-2.28665736" z3="0.3153795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83619075" y3="-0.71253095" z3="0.56023174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62090096" y3="-0.1967006" z3="-1.05358806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52951773" y3="0.41966968" z3="1.22637685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14704487" y3="-1.0478054" z3="1.85302838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41190235" y3="-4.37685447" z3="-0.37171393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15266383" y3="-4.60297981" z3="0.81781098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.88767264" y3="0.15046773" z3="-1.79844784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31716807" y3="0.64084813" z3="-0.86631812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.20103567" y3="-1.02489137" z3="-1.50132266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62551004" y3="0.53377649" z3="0.59990714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1925704" y3="0.06929608" z3="2.2158014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98721817" y3="1.41738597" z3="1.35792346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60682213" y3="-0.09535322" z3="2.17445599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95505644" y3="-1.69522937" z3="1.46929578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.70788368" y3="-1.52979638" z3="2.74459353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08430772" y3="-4.01366358" z3="0.81377011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55593716" y3="-4.34866262" z3="1.70701006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3916788" y3="-5.67443058" z3="0.81338399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28040174" y3="-2.19167775" z3="-0.16546942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14379905" y3="-3.30512369" z3="-1.00726076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50442173" y3="-4.4596821" z3="-0.57181568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00229432" y3="-4.49482808" z3="0.7233265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14895758" y3="-3.42209029" z3="1.59774509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78337029" y3="-2.27202776" z3="1.1455577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49937733" y3="-3.25064564" z3="-2.03945664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36828227" y3="-5.31211288" z3="-1.23773152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25813971" y3="-5.67397644" z3="1.16838345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74066855" y3="-3.48747187" z3="2.60727988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87610333" y3="-1.41517801" z3="1.81393694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.47860939" y3="4.0087139" z3="0.15201234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85229835" y3="3.81041958" z3="0.11276536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4227015" y3="3.33811019" z3="-1.06725369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6572742" y3="3.0748794" z3="-2.19890417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28290183" y3="3.26496793" z3="-2.13791932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0083662" y3="4.3409714" z3="1.08156145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48071636" y3="4.00172355" z3="0.98174568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86203991" y3="3.07361394" z3="-1.10247959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14254284" y3="2.71727945" z3="-3.10981209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3319655" y3="3.033953" z3="-3.00914409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15148712" y3="-5.86310734" z3="2.35901617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77168203" y3="-6.3908417" z3="0.31282566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37562907" y3="2.87918087" z3="-2.18377266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46327128" y3="3.048118" z3="-0.04527957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57450284" y3="0.15630132" z3="-2.09493542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90225261" y3="1.40418144" z3="-1.94812132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73107892" y3="0.07858208" z3="-2.91913756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18774589" y3="1.18035501" z3="-3.59890579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.24428136" y3="-0.88343209" z3="-3.01268054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.07420021" y3="1.10802617" z3="-4.2350709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3834394" y3="2.51927084" z3="-2.68985882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.49485524" y3="2.41021391" z3="-3.49060302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8533262" y3="3.47171782" z3="-2.62523884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.84314285" y3="3.28007455" z3="-4.05462936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58553533" y3="3.90584388" z3="-0.28105614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7753313" y3="5.05817911" z3="-0.05972008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9488076" y3="3.95622626" z3="0.12607591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48544485" y3="5.09986086" z3="0.66713325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57384925" y3="3.06844796" z3="0.01123314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53578206" y3="5.11237576" z3="0.97265309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36247739" y3="6.23129763" z3="0.4902577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68997955" y3="6.25833899" z3="0.83989907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73051939" y3="7.11230944" z3="0.64144456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13048799" y3="7.16444484" z3="1.26523432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30854299" y3="-3.95687145" z3="-2.89661855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50541518" y3="-4.98809469" z3="-2.5691769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16412798" y3="-3.6306816" z3="-3.51563035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41884339" y3="-3.96139132" z3="-3.54645756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66125127" y3="-1.61941583" z3="-2.12009938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38914644" y3="-1.14314318" z3="-2.79927102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5029741" y3="-0.95334682" z3="-1.25444373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70761231" y3="-1.66759891" z3="-2.6683592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9058,-.953,-.6983;6.5688,-1.9531,-1.5993;6.0527,-.9987,-1.4571;4.7517,1.4764,-1.0971;4.2786,.3144,-.5123;2.6334,2.743,-1.1277;3.9913,2.737,-.8618;2.385,4.9993,-.3382;1.7982,3.86,-.8363;1.7664,5.8758,-.1209;2.0482,1.6198,-1.6365;3.1366,.369,.2333;1.7026,.3887,-.5903;.6188,.7298,.3645;1.6379,-.8514,-1.4536;1.1025,-2.4809,-1.2865;2.185,-5.5092,-6.1987;1.8862,-5.0732,-5.2411;1.1081,-3.9284,-2.8096;1.8479,-3.6925,-5.0972;1.5623,-5.8982,-4.1611;1.1882,-5.3196,-2.9549;1.4671,-3.0881,-3.8882;2.1067,-3.0266,-5.924;1.6154,-6.986,-4.2512;.9757,-5.9518,-2.0885;.675,-3.3787,-1.5762;-.3355,-3.8664,-.8483;-.6711,-4.8691,-1.1253;-.3994,-3.5673,.5994;-.4834,-3.1033,3.3586;-.7357,-4.6022,1.4805;-.1253,-2.2952,1.1108;-.1637,-2.0658,2.4819;-.7691,-4.3724,2.8545;-.9299,-5.606,1.0922;.1076,-1.4557,.4554;.066,-1.0624,2.8494;-.9977,-5.1969,3.5347;-.5027,-2.927,4.4379;1.4195,-1.7523,-3.8629;1.515,-1.3423,-2.9589;.3241,3.7268,-.9613;-2.1103,-3.0033,-1.736;-2.9177,-3.1693,-.6068;-3.1226,-2.2867,.3154;-3.8362,-.7125,.5602;-4.6209,-.1967,-1.0536;-2.5295,.4197,1.2264;-5.147,-1.0478,1.853;-3.4119,-4.3769,-.3717;-4.1527,-4.603,.8178;-3.8877,.1505,-1.7984;-5.3172,.6408,-.8663;-5.201,-1.0249,-1.5013;-1.6255,.5338,.5999;-2.1926,.0693,2.2158;-2.9872,1.4174,1.3579;-5.6068,-.0954,2.1745;-5.9551,-1.6952,1.4693;-4.7079,-1.5298,2.7446;-5.0843,-4.0137,.8138;-3.5559,-4.3487,1.707;-4.3917,-5.6744,.8134;4.2804,-2.1917,-.1655;4.1438,-3.3051,-1.0073;3.5044,-4.4597,-.5718;3.0023,-4.4948,.7233;3.149,-3.4221,1.5977;3.7834,-2.272,1.1456;4.4994,-3.2506,-2.0395;3.3683,-5.3121,-1.2377;2.2581,-5.674,1.1684;2.7407,-3.4875,2.6073;3.8761,-1.4152,1.8139;-.4786,4.0087,.152;-1.8523,3.8104,.1128;-2.4227,3.3381,-1.0673;-1.6573,3.0749,-2.1989;-.2829,3.265,-2.1379;-.0084,4.341,1.0816;-2.4807,4.0017,.9817;-3.862,3.0736,-1.1025;-2.1425,2.7173,-3.1098;.332,3.034,-3.0091;2.1515,-5.8631,2.359;1.7717,-6.3908,.3128;-4.3756,2.8792,-2.1838;-4.4633,3.0481,-.0453;6.5745,.1563,-2.0949;5.9023,1.4042,-1.9481;7.7311,.0786,-2.9191;8.1877,1.1804,-3.5989;8.2443,-.8834,-3.0127;9.0742,1.108,-4.2351;6.3834,2.5193,-2.6899;7.4949,2.4102,-3.4906;5.8533,3.4717,-2.6252;7.8431,3.2801,-4.0546;4.5855,3.9058,-.2811;3.7753,5.0582,-.0597;5.9488,3.9562,.1261;6.4854,5.0999,.6671;6.5738,3.0684,.0112;7.5358,5.1124,.9727;4.3625,6.2313,.4903;5.69,6.2583,.8399;3.7305,7.1123,.6414;6.1305,7.1644,1.2652;-2.3085,-3.9569,-2.8966;-2.5054,-4.9881,-2.5692;-3.1641,-3.6307,-3.5156;-1.4188,-3.9614,-3.5465;-1.6613,-1.6194,-2.1201;-2.3891,-1.1431,-2.7993;-1.503,-.9533,-1.2544;-.7076,-1.6676,-2.6684;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662825569019</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007583607951 0.000717887387 0.016759390941 0.005336600561</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056536375 -0.002343036 0.000145285 0.000258546 0.000329761 0.000396683 0.000402300 0.000513329 0.000561954 0.000645779 0.000769606 0.000871018 0.001053722 0.001113437 0.001270638 0.001311616 0.001325075 0.001470598 0.001554002 0.001759393 0.001842473 0.002168608 0.002323780 0.002858337 0.003069810 0.003348006 0.003716118 0.003825314 0.004081173 0.004556117 0.004870557 0.005119046 0.005487953 0.005928214 0.005937920 0.006499639 0.006781988 0.007076360 0.007346435 0.007896472 0.008160924 0.008727892 0.009427283 0.009677503 0.010428152 0.010927088 0.011005003 0.011784402 0.012988881 0.013176243 0.013630785 0.014512188 0.014640935 0.015370672 0.015630550 0.015716897 0.016391407 0.016503619 0.017821359 0.018303548 0.019532513 0.020170769 0.020313152 0.021415539 0.021882265 0.022649948 0.023283132 0.023395091 0.024418602 0.025794169 0.026170390 0.026442626 0.026849670 0.027003716 0.027887224 0.028552333 0.030073840 0.030456555 0.032319268 0.032730219 0.034276489 0.035336730 0.038706438 0.038977249 0.041070292 0.041699072 0.045323080 0.045423233 0.046099925 0.048399546 0.049645447 0.050067374 0.051518558 0.051821931 0.051951479 0.052282510 0.052374531 0.052627793 0.053263970 0.055103795 0.055865452 0.056048416 0.056536720 0.056920516 0.057198170 0.057948620 0.058662237 0.059232923 0.060413818 0.060850816 0.061657566 0.062662428 0.063975589 0.064726159 0.064900319 0.066173224 0.067362627 0.068202516 0.068711184 0.071617486 0.071706660 0.072382700 0.072840461 0.075062126 0.076599924 0.080105577 0.081007462 0.082673895 0.082998143 0.085952011 0.088132178 0.089035028 0.089641814 0.091216366 0.093182146 0.094304692 0.095338870 0.095904195 0.096764010 0.097911177 0.099704640 0.100208051 0.101298443 0.102075629 0.103062199 0.103370871 0.104356248 0.107710067 0.109704954 0.111196037 0.111655951 0.112365894 0.113410005 0.115356862 0.116331962 0.116652233 0.117709205 0.118412488 0.121656346 0.124400053 0.124965528 0.127738830 0.128044708 0.129750663 0.133356867 0.135674277 0.137029528 0.138394726 0.139246001 0.141549953 0.143379756 0.145410259 0.146130901 0.151455460 0.151696898 0.153133732 0.159272550 0.160509807 0.166465344 0.171096166 0.174679663 0.178357624 0.181021853 0.183655449 0.186797345 0.188230786 0.189977610 0.198465299 0.201895227 0.205445024 0.206383231 0.207165266 0.209104659 0.210422520 0.212405556 0.213214443 0.216114493 0.217831516 0.219944629 0.222091167 0.225219952 0.231713397 0.232778324 0.234524372 0.237503364 0.244410221 0.247022519 0.249811689 0.255373380 0.255987523 0.257131687 0.261918129 0.271435586 0.281377127 0.291562262 0.298884720 0.299187024 0.300616682 0.306515082 0.307649091 0.308097985 0.318156695 0.321091746 0.325984464 0.327865651 0.332187566 0.347157667 0.351232415 0.355451247 0.358772777 0.359386791 0.363930092 0.383606894 0.406283956 0.411571250 0.429916477 0.430615813 0.432100766 0.446056241 0.461664001 0.464818211 0.468584491 0.477889644 0.485153444 0.498061261 0.499240233 0.513532240 0.515663229 0.543102771 0.565496955 0.567247763 0.583934631 0.591600120 0.605570564 0.641230062 0.644908996 0.665645768 0.674649690 0.685379112 0.691812509 0.699497733 0.700943433 0.704248604 0.715887004 0.725698955 0.735577294 0.737862899 0.746348750 0.750717913 0.771598327 0.775935598 0.805260561 0.817615778 0.821295035 0.827689088 0.833022965 0.845348277 0.846726904 0.847128035 0.852877371 0.859369665 0.867368523 0.874066182 0.876272645 0.879998160 0.885315253 0.890923008 0.896515941 0.900049170 0.914569775 0.917327355 0.923199597 0.924382755 0.931698057 0.939272605 0.954680041 0.959242760 0.969274363 0.974710112 0.982108959 0.998496221 1.003392088 1.012754749 1.018610214 1.038905081 1.049142661 1.055334690 1.068668785 1.076513653 1.086989873 1.102216455 1.110229422 1.111457679 1.117774190 1.122492856 1.123492054 1.134666836 1.144982323 1.161362899 1.169919018 1.173918637 1.176389882 1.200550061 1.218234959 1.228927458 1.247345790 1.295400151 1.296179032 1.314418690 1.325822780 1.326375955 1.328788607 1.330163230 1.334622292 1.341086127 1.346214544 1.362483374 1.378811752 1.380930512 1.381514436 1.409579981 1.508916058 1.557854404 1.671897574 1.912231420</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">128</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90565681" y3="-0.95350564" z3="-0.69852679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57032803" y3="-1.95311582" z3="-1.59701873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.054194" y3="-0.99872938" z3="-1.45488507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75312135" y3="1.47629897" z3="-1.09483754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2783377" y3="0.3137504" z3="-0.51239589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6352688" y3="2.74297163" z3="-1.12913321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99252582" y3="2.73671987" z3="-0.85998299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3851162" y3="4.99820245" z3="-0.33823829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7992008" y3="3.85953217" z3="-0.83855139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76602484" y3="5.87437866" z3="-0.12161397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0514375" y3="1.62019264" z3="-1.64042666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1347402" y3="0.36764186" z3="0.23088671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70239137" y3="0.38911702" z3="-0.5956487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61678512" y3="0.73085508" z3="0.35689859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6379642" y3="-0.85066856" z3="-1.45975498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10173503" y3="-2.480497" z3="-1.2898163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.17068118" y3="-5.5081612" z3="-6.20555506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.87471315" y3="-5.07225685" z3="-5.24710319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10365155" y3="-3.92742592" z3="-2.813244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.83627068" y3="-3.69176829" z3="-5.10321717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55461196" y3="-5.89722277" z3="-4.16587313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18394391" y3="-5.31863837" z3="-2.95863008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4595755" y3="-3.08734804" z3="-3.89302189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09209206" y3="-3.02560294" z3="-5.93080779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6080589" y3="-6.98506348" z3="-4.25599618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97416433" y3="-5.95077758" z3="-2.09161142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67289005" y3="-3.37756467" z3="-1.57884195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33595325" y3="-3.86471547" z3="-0.84876212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6717216" y3="-4.86779237" z3="-1.12430035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39723198" y3="-3.56472216" z3="0.59883647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47480572" y3="-3.09630511" z3="3.35785673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72715738" y3="-4.60031208" z3="1.48302472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1249096" y3="-2.29088219" z3="1.10752932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16040147" y3="-2.05892414" z3="2.47828948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.75739969" y3="-4.36816913" z3="2.8568936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91816174" y3="-5.60678818" z3="1.0977431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10380404" y3="-1.45123973" z3="0.44989884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06714489" y3="-1.05321809" z3="2.84310853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9809741" y3="-5.19292808" z3="3.53947522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.49186614" y3="-2.917933" z3="4.43705672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41285324" y3="-1.75184502" z3="-3.8689889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50643144" y3="-1.34010054" z3="-2.96343655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32523422" y3="3.72644906" z3="-0.96699631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11373074" y3="-3.00231409" z3="-1.73346385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91866473" y3="-3.16868382" z3="-0.60299773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12247194" y3="-2.28546791" z3="0.31860533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83651512" y3="-0.71214376" z3="0.56243064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62807235" y3="-0.20309198" z3="-1.04858936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52942203" y3="0.42492397" z3="1.2235811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14083622" y3="-1.04805678" z3="1.86075791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4121073" y3="-4.37534741" z3="-0.36658643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14838912" y3="-4.60269858" z3="0.82586068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.89754245" y3="0.14012909" z3="-1.79785656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3222688" y3="0.63696116" z3="-0.86322357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.21202816" y3="-1.03072035" z3="-1.48969059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62683345" y3="0.54007336" z3="0.59616903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.192807" y3="0.07392747" z3="2.21663077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98745462" y3="1.42291438" z3="1.35269449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60175024" y3="-0.09713148" z3="2.18321112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.94808964" y3="-1.69892072" z3="1.47998853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.69761345" y3="-1.52678355" z3="2.75236205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0803792" y3="-4.01450362" z3="0.82595305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54758702" y3="-4.3468402" z3="1.71244246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38653537" y3="-5.67473974" z3="0.82380137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27921932" y3="-2.19250292" z3="-0.16773409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14279996" y3="-3.3048592" z3="-1.01094331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50371209" y3="-4.46006627" z3="-0.5768788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00196173" y3="-4.49696502" z3="0.71839279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14781617" y3="-3.42501655" z3="1.59395561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78162592" y3="-2.27416892" z3="1.14300014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49861502" y3="-3.24902908" z3="-2.0429912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36778541" y3="-5.31174811" z3="-1.2437939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25950136" y3="-5.67749796" z3="1.16261692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73948147" y3="-3.49168074" z3="2.60341358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87369591" y3="-1.41776398" z3="1.8121143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48019127" y3="4.01002789" z3="0.14411332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.854761" y3="3.81434524" z3="0.09883985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41899464" y3="3.33197184" z3="-1.07370025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65354139" y3="3.07220066" z3="-2.20973252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27882912" y3="3.26286194" z3="-2.14490362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01354485" y3="4.34532473" z3="1.07298308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48490829" y3="4.00613272" z3="0.96869962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86080214" y3="3.07081846" z3="-1.11823775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13384074" y3="2.70758807" z3="-3.11654922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.33763514" y3="3.03166653" z3="-3.01582398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15499462" y3="-5.86892381" z3="2.3532272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77232056" y3="-6.39325128" z3="0.30656591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37132776" y3="2.86858619" z3="-2.19777522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46391277" y3="3.04980667" z3="-0.06104249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57785501" y3="0.15687004" z3="-2.09005223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90561493" y3="1.40476846" z3="-1.9433145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73660353" y3="0.07990279" z3="-2.91129311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.19556395" y3="1.18249523" z3="-3.58820487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.24976069" y3="-0.88213965" z3="-3.0046964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.08390295" y3="1.11084599" z3="-4.22181305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38892743" y3="2.52059039" z3="-2.68266125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.50260872" y3="2.41231506" z3="-3.48043517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85871003" y3="3.4729506" z3="-2.61880166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.85276984" y3="3.28282542" z3="-4.04234821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58570641" y3="3.9048944" z3="-0.27678211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77498176" y3="5.05674527" z3="-0.05662887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94773717" y3="3.95518605" z3="0.13383298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48257902" y3="5.09823447" z3="0.67769382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57320486" y3="3.06790045" z3="0.01981055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53166607" y3="5.11088242" z3="0.98616275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36072306" y3="6.2291986" z3="0.49576631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68676072" y3="6.25617683" z3="0.84933856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72839807" y3="7.10955964" z3="0.64549324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12593917" y3="7.1617307" z3="1.27696573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31308571" y3="-3.95905454" z3="-2.89233048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50623512" y3="-4.99134093" z3="-2.55948786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17287925" y3="-3.63782794" z3="-3.51211117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4249232" y3="-3.96368936" z3="-3.54403306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66730976" y3="-1.61790385" z3="-2.11796106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39668252" y3="-1.14443164" z3="-2.8026746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50547793" y3="-0.95639094" z3="-1.25514293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71253459" y3="-1.66785806" z3="-2.66650848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9057,-.9535,-.6985;6.5703,-1.9531,-1.597;6.0542,-.9987,-1.4549;4.7531,1.4763,-1.0948;4.2783,.3138,-.5124;2.6353,2.743,-1.1291;3.9925,2.7367,-.86;2.3851,4.9982,-.3382;1.7992,3.8595,-.8386;1.766,5.8744,-.1216;2.0514,1.6202,-1.6404;3.1347,.3676,.2309;1.7024,.3891,-.5956;.6168,.7309,.3569;1.638,-.8507,-1.4598;1.1017,-2.4805,-1.2898;2.1707,-5.5082,-6.2056;1.8747,-5.0723,-5.2471;1.1037,-3.9274,-2.8132;1.8363,-3.6918,-5.1032;1.5546,-5.8972,-4.1659;1.1839,-5.3186,-2.9586;1.4596,-3.0873,-3.893;2.0921,-3.0256,-5.9308;1.6081,-6.9851,-4.256;.9742,-5.9508,-2.0916;.6729,-3.3776,-1.5788;-.336,-3.8647,-.8488;-.6717,-4.8678,-1.1243;-.3972,-3.5647,.5988;-.4748,-3.0963,3.3579;-.7272,-4.6003,1.483;-.1249,-2.2909,1.1075;-.1604,-2.0589,2.4783;-.7574,-4.3682,2.8569;-.9182,-5.6068,1.0977;.1038,-1.4512,.4499;.0671,-1.0532,2.8431;-.981,-5.1929,3.5395;-.4919,-2.9179,4.4371;1.4129,-1.7518,-3.869;1.5064,-1.3401,-2.9634;.3252,3.7264,-.967;-2.1137,-3.0023,-1.7335;-2.9187,-3.1687,-.603;-3.1225,-2.2855,.3186;-3.8365,-.7121,.5624;-4.6281,-.2031,-1.0486;-2.5294,.4249,1.2236;-5.1408,-1.0481,1.8608;-3.4121,-4.3753,-.3666;-4.1484,-4.6027,.8259;-3.8975,.1401,-1.7979;-5.3223,.637,-.8632;-5.212,-1.0307,-1.4897;-1.6268,.5401,.5962;-2.1928,.0739,2.2166;-2.9875,1.4229,1.3527;-5.6018,-.0971,2.1832;-5.9481,-1.6989,1.48;-4.6976,-1.5268,2.7524;-5.0804,-4.0145,.826;-3.5476,-4.3468,1.7124;-4.3865,-5.6747,.8238;4.2792,-2.1925,-.1677;4.1428,-3.3049,-1.0109;3.5037,-4.4601,-.5769;3.002,-4.497,.7184;3.1478,-3.425,1.594;3.7816,-2.2742,1.143;4.4986,-3.249,-2.043;3.3678,-5.3117,-1.2438;2.2595,-5.6775,1.1626;2.7395,-3.4917,2.6034;3.8737,-1.4178,1.8121;-.4802,4.01,.1441;-1.8548,3.8143,.0988;-2.419,3.332,-1.0737;-1.6535,3.0722,-2.2097;-.2788,3.2629,-2.1449;-.0135,4.3453,1.073;-2.4849,4.0061,.9687;-3.8608,3.0708,-1.1182;-2.1338,2.7076,-3.1165;.3376,3.0317,-3.0158;2.155,-5.8689,2.3532;1.7723,-6.3933,.3066;-4.3713,2.8686,-2.1978;-4.4639,3.0498,-.061;6.5779,.1569,-2.0901;5.9056,1.4048,-1.9433;7.7366,.0799,-2.9113;8.1956,1.1825,-3.5882;8.2498,-.8821,-3.0047;9.0839,1.1108,-4.2218;6.3889,2.5206,-2.6827;7.5026,2.4123,-3.4804;5.8587,3.473,-2.6188;7.8528,3.2828,-4.0423;4.5857,3.9049,-.2768;3.775,5.0567,-.0566;5.9477,3.9552,.1338;6.4826,5.0982,.6777;6.5732,3.0679,.0198;7.5317,5.1109,.9862;4.3607,6.2292,.4958;5.6868,6.2562,.8493;3.7284,7.1096,.6455;6.1259,7.1617,1.277;-2.3131,-3.9591,-2.8923;-2.5062,-4.9913,-2.5595;-3.1729,-3.6378,-3.5121;-1.4249,-3.9637,-3.544;-1.6673,-1.6179,-2.118;-2.3967,-1.1444,-2.8027;-1.5055,-.9564,-1.2551;-.7125,-1.6679,-2.6665;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662834956480</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007930287852 0.000766656264 0.016878415198 0.005338222861</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056574285 -0.002507872 0.000146512 0.000258756 0.000330287 0.000397214 0.000402847 0.000513714 0.000562251 0.000645808 0.000769580 0.000875008 0.001055705 0.001113364 0.001272551 0.001312997 0.001325351 0.001476292 0.001553916 0.001759094 0.001846776 0.002169050 0.002325096 0.002872493 0.003080380 0.003352362 0.003716778 0.003832584 0.004082390 0.004555835 0.004870582 0.005118738 0.005487791 0.005928074 0.005940243 0.006511478 0.006783237 0.007078083 0.007346409 0.007901611 0.008161034 0.008738169 0.009428520 0.009678840 0.010428913 0.010930554 0.011003936 0.011801591 0.013006689 0.013183998 0.013671159 0.014519378 0.014656894 0.015370673 0.015630518 0.015717013 0.016391401 0.016582242 0.017821308 0.018305017 0.019534893 0.020196428 0.020364650 0.021416469 0.021898925 0.022650112 0.023288837 0.023408808 0.024418666 0.025794974 0.026171268 0.026443455 0.026849394 0.027003260 0.027889118 0.028558250 0.030073688 0.030456944 0.032359352 0.032730427 0.034287688 0.035337680 0.038707365 0.038981009 0.041080700 0.041712770 0.045323317 0.045424079 0.046101101 0.048412893 0.049646171 0.050082347 0.051518643 0.051821894 0.051953651 0.052282567 0.052374507 0.052628626 0.053263746 0.055126285 0.055898578 0.056047329 0.056537735 0.056920305 0.057199729 0.057948694 0.058664654 0.059233506 0.060431156 0.060862827 0.061671681 0.062691913 0.063989076 0.064727900 0.064919100 0.066198788 0.067367345 0.068254951 0.068712694 0.071617976 0.071719827 0.072384402 0.072841995 0.075091000 0.076626929 0.080106366 0.081007991 0.082683560 0.083009920 0.085952182 0.088133192 0.089035346 0.089643470 0.091216505 0.093182913 0.094306180 0.095341036 0.095908455 0.096765372 0.097912164 0.099721240 0.100211456 0.101298646 0.102083074 0.103063800 0.103393146 0.104377135 0.107720614 0.109785499 0.111237939 0.111657344 0.112367472 0.113422546 0.115483418 0.116381881 0.116699823 0.118009484 0.118415530 0.121657494 0.124423529 0.124980235 0.127817833 0.128044708 0.129767979 0.133356894 0.135674831 0.137036136 0.138411233 0.139257656 0.141552288 0.143379443 0.145414380 0.146130920 0.151470051 0.151800290 0.153135255 0.159279969 0.160520607 0.166478746 0.171098870 0.174704523 0.178382213 0.181037156 0.183658377 0.186897809 0.188240251 0.189994246 0.198465881 0.201899130 0.205454374 0.206443389 0.207168251 0.209106244 0.210782625 0.212406850 0.213227706 0.216114474 0.217841516 0.220054672 0.222269926 0.225236813 0.231719104 0.232795746 0.234545341 0.237701221 0.244514727 0.247029944 0.249864329 0.255382714 0.256095385 0.257133764 0.261923453 0.271435662 0.281696612 0.291601321 0.298933800 0.299352910 0.300618234 0.306569344 0.307657958 0.308408733 0.318157563 0.321092068 0.326047237 0.327866589 0.332875940 0.347157895 0.351236753 0.355472731 0.358810407 0.359404154 0.363935696 0.383666699 0.406322905 0.411571147 0.429917202 0.430771280 0.432108110 0.446076428 0.462117700 0.464819542 0.469084504 0.477889991 0.485155425 0.498061300 0.499626851 0.513534747 0.515703038 0.543104249 0.565497093 0.567247812 0.583961997 0.591616112 0.605571503 0.641244311 0.644916789 0.665646169 0.674675198 0.685400851 0.691816441 0.699508414 0.700945261 0.704248605 0.715902050 0.725791122 0.735580494 0.737880545 0.746388633 0.750718741 0.771598453 0.775938472 0.805437703 0.817631358 0.821325332 0.827768165 0.833102977 0.845407182 0.846745952 0.847219374 0.852896612 0.859410905 0.867368913 0.874074506 0.876527399 0.880312656 0.885709337 0.890930152 0.897051222 0.900260959 0.914675856 0.917365754 0.923359974 0.924383590 0.931698645 0.939295996 0.954718611 0.959249899 0.969276432 0.974730645 0.982110023 0.998496242 1.003619264 1.012754717 1.018610754 1.038905380 1.049144897 1.055334787 1.068668818 1.076525373 1.086989971 1.102297729 1.110230710 1.111479454 1.117774704 1.122493755 1.123494386 1.134670186 1.144998107 1.161364506 1.169919202 1.173923237 1.176389916 1.200550136 1.218252959 1.229091172 1.247347526 1.295400268 1.296196108 1.314444952 1.326048536 1.326405529 1.328992435 1.330163180 1.334622783 1.341088353 1.346252988 1.362485141 1.378811974 1.380930843 1.381514482 1.412813638 1.509009935 1.557854421 1.671899124 1.912852245</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">129</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90561012" y3="-0.95415944" z3="-0.69846004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57173606" y3="-1.95332862" z3="-1.59481993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05575092" y3="-0.99888006" z3="-1.45236748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75462952" y3="1.47623726" z3="-1.09179294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27825267" y3="0.31302378" z3="-0.51195811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63699985" y3="2.74300338" z3="-1.13092544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99340381" y3="2.73649938" z3="-0.85779859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38521207" y3="4.99794508" z3="-0.34024031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80031266" y3="3.85962692" z3="-0.84248492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76597127" y3="5.8742423" z3="-0.12539563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05493758" y3="1.62034801" z3="-1.6442661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13306635" y3="0.36613978" z3="0.22890609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70241504" y3="0.3893026" z3="-0.60057056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61537148" y3="0.73276175" z3="0.34983646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63856992" y3="-0.85021076" z3="-1.46487458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10019125" y3="-2.47884181" z3="-1.29405976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.15637863" y3="-5.50721906" z3="-6.21223925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.86323493" y3="-5.07115338" z3="-5.25295576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09862144" y3="-3.92618989" z3="-2.81720236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.82444262" y3="-3.69050757" z3="-5.10930315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.54683952" y3="-5.89603633" z3="-4.17059343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17937943" y3="-5.31742034" z3="-2.96234343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.45063082" y3="-3.0860433" z3="-3.89822967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07744415" y3="-3.02455314" z3="-5.9379748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.600586" y3="-6.9839025" z3="-4.2606484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97227128" y3="-5.94942983" z3="-2.09457089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67077819" y3="-3.37611374" z3="-1.58204539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33675242" y3="-3.86337409" z3="-0.84936681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67221217" y3="-4.86705883" z3="-1.12299494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39394734" y3="-3.56183791" z3="0.59824255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46485327" y3="-3.09156579" z3="3.35662062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71995232" y3="-4.5963764" z3="1.48369683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12342684" y3="-2.28703559" z3="1.10491332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15529247" y3="-2.05435368" z3="2.47556096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.74688626" y3="-4.36334475" z3="2.85727771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91210934" y3="-5.6012682" z3="1.09867777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10029989" y3="-1.44730576" z3="0.44561034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07089438" y3="-1.04841567" z3="2.83904733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.96788951" y3="-5.1872936" z3="3.54049501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.47960896" y3="-2.91233903" z3="4.43558936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40197288" y3="-1.750368" z3="-3.87330864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50199921" y3="-1.34004418" z3="-2.96936302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32662489" y3="3.72680948" z3="-0.97420415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11491789" y3="-3.00474553" z3="-1.73100793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91770973" y3="-3.16893165" z3="-0.59780829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11973142" y3="-2.28508436" z3="0.32343624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83643327" y3="-0.71198201" z3="0.56712212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.63445085" y3="-0.206382" z3="-1.04249221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52974486" y3="0.42820401" z3="1.22029702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.13876368" y3="-1.04804365" z3="1.87011629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40885875" y3="-4.37662" z3="-0.35811241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14261329" y3="-4.60221247" z3="0.83591783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.90716956" y3="0.13377875" z3="-1.79633863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.32658034" y3="0.63449278" z3="-0.85540019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.22027833" y3="-1.03632423" z3="-1.47800733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6274232" y3="0.54207814" z3="0.59044367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18835475" y3="0.08451473" z3="2.21096967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98808374" y3="1.42658922" z3="1.34591195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.59919319" y3="-0.09566196" z3="2.19088034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.94680056" y3="-1.69972319" z3="1.49459234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.69142519" y3="-1.52468345" z3="2.75975892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07641949" y3="-4.01594082" z3="0.83487254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54157377" y3="-4.34278343" z3="1.72140426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37781344" y3="-5.67519978" z3="0.83634259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27807089" y3="-2.19353807" z3="-0.1699537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14163633" y3="-3.30478141" z3="-1.01462029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50285291" y3="-4.46066056" z3="-0.58185869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00177773" y3="-4.49942265" z3="0.71363198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14703476" y3="-3.42834478" z3="1.59032662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78017194" y3="-2.27667497" z3="1.14052522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49751495" y3="-3.24758864" z3="-2.04657366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36703442" y3="-5.31165723" z3="-1.24972932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26097691" y3="-5.68123238" z3="1.15701474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73883364" y3="-3.49627965" z3="2.59975742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8718502" y3="-1.42088317" z3="1.81043894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4820184" y3="4.01415401" z3="0.13289761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85506595" y3="3.81288869" z3="0.08943661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41944017" y3="3.33282811" z3="-1.09057866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64814282" y3="3.06507629" z3="-2.21677336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27449364" y3="3.25821146" z3="-2.15061065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0179896" y3="4.35298373" z3="1.06214262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48696178" y3="4.00628221" z3="0.95698909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85806915" y3="3.06435238" z3="-1.13023356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12841056" y3="2.70135787" z3="-3.12790638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3443352" y3="3.02456045" z3="-3.0184752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15887504" y3="-5.87503047" z3="2.34743599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77264171" y3="-6.39568067" z3="0.30053411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36609678" y3="2.85692944" z3="-2.21191716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46442178" y3="3.04922505" z3="-0.07587046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58132883" y3="0.15744947" z3="-2.08462188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9091987" y3="1.40543911" z3="-1.93754489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74190472" y3="0.08110938" z3="-2.90346819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.20273064" y3="1.18436636" z3="-3.57806349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25496642" y3="-0.88100514" z3="-2.99708117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.09240627" y3="1.11314901" z3="-4.21005587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39462358" y3="2.52207562" z3="-2.67423957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.50994476" y3="2.41433969" z3="-3.46999446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86462858" y3="3.47466316" z3="-2.60997527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.86153242" y3="3.2853775" z3="-4.03020996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58488746" y3="3.904205" z3="-0.27207199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77386368" y3="5.05618096" z3="-0.05410658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94540462" y3="3.95396351" z3="0.14328047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47878479" y3="5.09663051" z3="0.68948062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57088776" y3="3.06652033" z3="0.03095209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52674552" y3="5.10881496" z3="1.00184295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35809757" y3="6.22838223" z3="0.50042695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68299551" y3="6.25480914" z3="0.85852961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7257471" y3="7.10910857" z3="0.6482079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12103725" y3="7.1601306" z3="1.28783248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31709516" y3="-3.96289577" z3="-2.88812919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50750787" y3="-4.99450247" z3="-2.55609498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17860596" y3="-3.64260557" z3="-3.50375256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43116552" y3="-3.96539173" z3="-3.54283202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67006736" y3="-1.6209644" z3="-2.12060479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40093228" y3="-1.14828885" z3="-2.79816221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51194214" y3="-0.95102414" z3="-1.2566844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71779117" y3="-1.66775315" z3="-2.6709434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9056,-.9542,-.6985;6.5717,-1.9533,-1.5948;6.0558,-.9989,-1.4524;4.7546,1.4762,-1.0918;4.2783,.313,-.512;2.637,2.743,-1.1309;3.9934,2.7365,-.8578;2.3852,4.9979,-.3402;1.8003,3.8596,-.8425;1.766,5.8742,-.1254;2.0549,1.6203,-1.6443;3.1331,.3661,.2289;1.7024,.3893,-.6006;.6154,.7328,.3498;1.6386,-.8502,-1.4649;1.1002,-2.4788,-1.2941;2.1564,-5.5072,-6.2122;1.8632,-5.0712,-5.253;1.0986,-3.9262,-2.8172;1.8244,-3.6905,-5.1093;1.5468,-5.896,-4.1706;1.1794,-5.3174,-2.9623;1.4506,-3.086,-3.8982;2.0774,-3.0246,-5.938;1.6006,-6.9839,-4.2606;.9723,-5.9494,-2.0946;.6708,-3.3761,-1.582;-.3368,-3.8634,-.8494;-.6722,-4.8671,-1.123;-.3939,-3.5618,.5982;-.4649,-3.0916,3.3566;-.72,-4.5964,1.4837;-.1234,-2.287,1.1049;-.1553,-2.0544,2.4756;-.7469,-4.3633,2.8573;-.9121,-5.6013,1.0987;.1003,-1.4473,.4456;.0709,-1.0484,2.839;-.9679,-5.1873,3.5405;-.4796,-2.9123,4.4356;1.402,-1.7504,-3.8733;1.502,-1.34,-2.9694;.3266,3.7268,-.9742;-2.1149,-3.0047,-1.731;-2.9177,-3.1689,-.5978;-3.1197,-2.2851,.3234;-3.8364,-.712,.5671;-4.6345,-.2064,-1.0425;-2.5297,.4282,1.2203;-5.1388,-1.048,1.8701;-3.4089,-4.3766,-.3581;-4.1426,-4.6022,.8359;-3.9072,.1338,-1.7963;-5.3266,.6345,-.8554;-5.2203,-1.0363,-1.478;-1.6274,.5421,.5904;-2.1884,.0845,2.211;-2.9881,1.4266,1.3459;-5.5992,-.0957,2.1909;-5.9468,-1.6997,1.4946;-4.6914,-1.5247,2.7598;-5.0764,-4.0159,.8349;-3.5416,-4.3428,1.7214;-4.3778,-5.6752,.8363;4.2781,-2.1935,-.17;4.1416,-3.3048,-1.0146;3.5029,-4.4607,-.5819;3.0018,-4.4994,.7136;3.147,-3.4283,1.5903;3.7802,-2.2767,1.1405;4.4975,-3.2476,-2.0466;3.367,-5.3117,-1.2497;2.261,-5.6812,1.157;2.7388,-3.4963,2.5998;3.8719,-1.4209,1.8104;-.482,4.0142,.1329;-1.8551,3.8129,.0894;-2.4194,3.3328,-1.0906;-1.6481,3.0651,-2.2168;-.2745,3.2582,-2.1506;-.018,4.353,1.0621;-2.487,4.0063,.957;-3.8581,3.0644,-1.1302;-2.1284,2.7014,-3.1279;.3443,3.0246,-3.0185;2.1589,-5.875,2.3474;1.7726,-6.3957,.3005;-4.3661,2.8569,-2.2119;-4.4644,3.0492,-.0759;6.5813,.1574,-2.0846;5.9092,1.4054,-1.9375;7.7419,.0811,-2.9035;8.2027,1.1844,-3.5781;8.255,-.881,-2.9971;9.0924,1.1131,-4.2101;6.3946,2.5221,-2.6742;7.5099,2.4143,-3.47;5.8646,3.4747,-2.61;7.8615,3.2854,-4.0302;4.5849,3.9042,-.2721;3.7739,5.0562,-.0541;5.9454,3.954,.1433;6.4788,5.0966,.6895;6.5709,3.0665,.031;7.5267,5.1088,1.0018;4.3581,6.2284,.5004;5.683,6.2548,.8585;3.7257,7.1091,.6482;6.121,7.1601,1.2878;-2.3171,-3.9629,-2.8881;-2.5075,-4.9945,-2.5561;-3.1786,-3.6426,-3.5038;-1.4312,-3.9654,-3.5428;-1.6701,-1.621,-2.1206;-2.4009,-1.1483,-2.7982;-1.5119,-.951,-1.2567;-.7178,-1.6678,-2.6709;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662845174467</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.007686310597 0.000769265763 0.018082594035 0.005337445755</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056635548 -0.002602060 0.000149910 0.000259227 0.000330224 0.000397709 0.000403660 0.000513861 0.000564124 0.000645984 0.000769632 0.000877723 0.001055708 0.001113781 0.001272862 0.001313176 0.001326382 0.001490761 0.001561357 0.001764652 0.001856081 0.002168920 0.002325609 0.002873040 0.003090329 0.003352233 0.003718425 0.003837573 0.004086250 0.004563178 0.004871349 0.005120064 0.005494173 0.005934191 0.005952021 0.006522565 0.006784489 0.007078210 0.007348942 0.007901414 0.008161807 0.008742533 0.009432400 0.009678652 0.010434125 0.010931024 0.011003385 0.011806803 0.013009405 0.013183578 0.013673771 0.014520679 0.014654704 0.015373766 0.015630766 0.015717366 0.016391603 0.016626565 0.017823475 0.018310243 0.019535126 0.020216329 0.020537313 0.021424262 0.021923788 0.022651946 0.023290144 0.023407509 0.024418925 0.025795275 0.026174323 0.026445834 0.026849420 0.027008141 0.027889224 0.028569235 0.030075938 0.030456929 0.032406965 0.032731797 0.034288962 0.035338845 0.038707877 0.038986065 0.041109636 0.041726600 0.045326451 0.045436414 0.046102493 0.048416586 0.049646347 0.050086653 0.051518637 0.051822031 0.051953564 0.052282586 0.052375255 0.052628932 0.053270620 0.055148561 0.055938330 0.056069434 0.056537984 0.056922759 0.057199479 0.057949114 0.058664469 0.059233443 0.060463436 0.060861678 0.061673844 0.062711807 0.064017294 0.064733046 0.064946170 0.066247536 0.067369870 0.068292060 0.068712915 0.071622982 0.071774581 0.072387151 0.072844542 0.075094786 0.076648431 0.080115585 0.081009230 0.082706205 0.083024090 0.085955440 0.088135248 0.089037225 0.089647192 0.091216680 0.093183261 0.094314076 0.095344466 0.095910525 0.096771094 0.097912766 0.099735375 0.100212775 0.101298640 0.102088542 0.103063440 0.103423667 0.104428320 0.107722745 0.109927478 0.111276476 0.111658482 0.112377164 0.113436051 0.115632875 0.116438785 0.116743648 0.118349359 0.118530187 0.121659187 0.124445449 0.124986717 0.127852996 0.128045913 0.129774956 0.133359206 0.135675645 0.137034744 0.138425241 0.139312878 0.141552034 0.143380614 0.145419763 0.146131002 0.151494854 0.151908748 0.153142259 0.159300030 0.160535136 0.166499188 0.171111101 0.174737223 0.178427733 0.181065925 0.183659848 0.186957225 0.188268774 0.190024311 0.198476120 0.201900806 0.205458140 0.206493701 0.207171377 0.209107639 0.211050917 0.212407244 0.213245731 0.216123153 0.217852153 0.220132791 0.222377130 0.225253194 0.231722436 0.232811325 0.234560524 0.237862243 0.244579250 0.247042271 0.249896211 0.255387459 0.256203298 0.257134380 0.261925161 0.271435656 0.282009184 0.291615807 0.298979392 0.299488795 0.300623504 0.306631130 0.307659603 0.308723460 0.318168976 0.321092081 0.326082650 0.327866988 0.333513270 0.347164197 0.351236955 0.355491292 0.358844790 0.359422509 0.363943801 0.383698514 0.406361081 0.411573385 0.429924335 0.430809010 0.432124935 0.446113892 0.462576951 0.464821809 0.469617444 0.477890007 0.485155638 0.498061308 0.500067786 0.513534892 0.515736406 0.543105080 0.565497275 0.567247872 0.583978919 0.591625454 0.605572454 0.641244035 0.644927597 0.665649807 0.674723388 0.685407865 0.691832899 0.699522086 0.700945265 0.704248642 0.715954806 0.725789575 0.735599494 0.737894295 0.746498050 0.750718738 0.771598550 0.775940847 0.805681644 0.817693097 0.821365424 0.827815584 0.833210336 0.845449147 0.846755245 0.847231628 0.852921706 0.859445250 0.867368912 0.874085197 0.876760149 0.880699647 0.886223818 0.890975136 0.897610712 0.900664718 0.914754008 0.917431709 0.923755155 0.924388689 0.931699453 0.939368965 0.954791990 0.959250821 0.969277133 0.974730984 0.982111070 0.998496245 1.003836617 1.012759051 1.018611175 1.038905962 1.049150650 1.055335830 1.068682666 1.076540767 1.086991352 1.102318165 1.110233454 1.111512633 1.117775379 1.122493826 1.123495201 1.134670155 1.145002374 1.161368393 1.169919242 1.173935273 1.176390023 1.200550219 1.218255960 1.229289805 1.247347536 1.295401863 1.296217670 1.314473384 1.326165112 1.326465930 1.329164652 1.330163351 1.334622803 1.341092574 1.346258159 1.362506530 1.378812403 1.380932658 1.381517420 1.415972383 1.509073726 1.557854575 1.671899547 1.913564205</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">130</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90533761" y3="-0.95445781" z3="-0.69813878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57306656" y3="-1.95326308" z3="-1.59173848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05707956" y3="-0.99880048" z3="-1.44959171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7559116" y3="1.47630297" z3="-1.08944952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27788342" y3="0.31265291" z3="-0.5118509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63857832" y3="2.74333103" z3="-1.13344543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99420882" y3="2.73650808" z3="-0.85651693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38423389" y3="4.99788963" z3="-0.34147174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8009589" y3="3.8597671" z3="-0.84639117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76432783" y3="5.87423944" z3="-0.12736603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05796283" y3="1.62077991" z3="-1.64894791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13102617" y3="0.36517142" z3="0.22642986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70221071" y3="0.39002965" z3="-0.60607709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61367541" y3="0.734324" z3="0.34228564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63902562" y3="-0.8493688" z3="-1.47080873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09927797" y3="-2.47704897" z3="-1.29837833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.14167061" y3="-5.50639519" z3="-6.21895617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.85129699" y3="-5.07021207" z3="-5.25887723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09411968" y3="-3.92504272" z3="-2.82096747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.81231418" y3="-3.68960035" z3="-5.11549585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.53885908" y3="-5.89497745" z3="-4.17525373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17499949" y3="-5.31624429" z3="-2.96597976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4424639" y3="-3.08506269" z3="-3.90326746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06230436" y3="-3.02367371" z3="-5.94508831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59283552" y3="-6.98282773" z3="-4.26521156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97078792" y3="-5.94815326" z3="-2.09744834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66933968" y3="-3.37484283" z3="-1.58466665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33562703" y3="-3.86238871" z3="-0.84959014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6718554" y3="-4.86610346" z3="-1.12205501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39123396" y3="-3.55921577" z3="0.59757544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4564843" y3="-3.08556085" z3="3.35581336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71385176" y3="-4.59333039" z3="1.4850683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12088932" y3="-2.28392099" z3="1.10249341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14993431" y3="-2.04944576" z3="2.47291755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7378385" y3="-4.3586338" z3="2.85855448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90306506" y3="-5.60128118" z3="1.10259978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10249729" y3="-1.44590241" z3="0.44272441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07690885" y3="-1.0433117" z3="2.83498168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.95499946" y3="-5.18259372" z3="3.54371239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46798362" y3="-2.90562795" z3="4.43476012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39381661" y3="-1.74947941" z3="-3.87892576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49599615" y3="-1.3382334" z3="-2.97473024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32770671" y3="3.72631892" z3="-0.98171506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11887264" y3="-3.0034911" z3="-1.72783695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9175906" y3="-3.16937578" z3="-0.59294884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11893926" y3="-2.28442737" z3="0.32787674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83765765" y3="-0.7123604" z3="0.57013259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64173465" y3="-0.21180496" z3="-1.0382255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53092488" y3="0.43280792" z3="1.21568671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.13089544" y3="-1.04676849" z3="1.87900875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40665254" y3="-4.37723812" z3="-0.35096466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13734308" y3="-4.60278172" z3="0.84515882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.91763268" y3="0.12598112" z3="-1.79607354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33265185" y3="0.63053014" z3="-0.85134832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.23091984" y3="-1.04178637" z3="-1.46954768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63182599" y3="0.54371562" z3="0.58323248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18850016" y3="0.09234315" z3="2.20951468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99137756" y3="1.43055472" z3="1.33811958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.59398999" y3="-0.09642858" z3="2.20071264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93849597" y3="-1.70220192" z3="1.50636032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.68017756" y3="-1.52068452" z3="2.77010347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07122936" y3="-4.01744315" z3="0.84672909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53450909" y3="-4.34276526" z3="1.72877027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37218947" y3="-5.67520816" z3="0.8466671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27686784" y3="-2.19426572" z3="-0.17161437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14040266" y3="-3.30442351" z3="-1.01776439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50199581" y3="-4.46104351" z3="-0.58638212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00162397" y3="-4.50173985" z3="0.7093412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14654466" y3="-3.43165388" z3="1.58730033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77896174" y3="-2.27907993" z3="1.13872147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49623046" y3="-3.24576927" z3="-2.04964391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36613806" y3="-5.31119424" z3="-1.25531524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26199447" y3="-5.68461733" z3="1.15163977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73869755" y3="-3.501025" z3="2.59678042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87032825" y3="-1.42394006" z3="1.80957602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48295047" y3="4.0142803" z3="0.12549235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85682474" y3="3.81573134" z3="0.0756236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4153347" y3="3.32583952" z3="-1.09709787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64479935" y3="3.06195902" z3="-2.22905539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27097897" y3="3.25666476" z3="-2.16036115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01934611" y3="4.35345947" z3="1.05605741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49200538" y3="4.01258952" z3="0.93890649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85592022" y3="3.05941479" z3="-1.14502378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12060895" y3="2.69155956" z3="-3.13628456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34946974" y3="3.02152923" z3="-3.02688238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16110115" y3="-5.88007947" z3="2.34174315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77333287" y3="-6.39827283" z3="0.29465492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36037228" y3="2.84293234" z3="-2.22473347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46437703" y3="3.04900663" z3="-0.09070763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58449949" y3="0.15804667" z3="-2.07937991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91252584" y3="1.40607727" z3="-1.93242654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74698503" y3="0.08231217" z3="-2.89542597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.20990957" y3="1.18630294" z3="-3.56732182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25985777" y3="-0.87988147" z3="-2.98897368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.10103355" y3="1.11556487" z3="-4.19713586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.40031714" y3="2.52354275" z3="-2.66627777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.51753167" y3="2.41646606" z3="-3.45921831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87078673" y3="3.47631787" z3="-2.60191361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.87093627" y3="3.28822219" z3="-4.01711386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58399736" y3="3.90376321" z3="-0.26819854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7722727" y3="5.05577604" z3="-0.05124042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94366876" y3="3.95268924" z3="0.1506802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4759398" y3="5.09478251" z3="0.69922227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56927687" y3="3.06496127" z3="0.03901318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52350422" y3="5.10621938" z3="1.01388693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35509285" y3="6.22736126" z3="0.50660389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67938907" y3="6.25306195" z3="0.86794745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72221467" y3="7.10820581" z3="0.65444669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11647668" y3="7.15793395" z3="1.29938853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32229037" y3="-3.96146437" z3="-2.88421081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5137325" y3="-4.99267065" z3="-2.5509191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18386018" y3="-3.64022454" z3="-3.49867434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43730091" y3="-3.96636613" z3="-3.54044163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67568718" y3="-1.61921604" z3="-2.11661942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40745037" y3="-1.14849049" z3="-2.80152493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51212373" y3="-0.95692678" z3="-1.2562088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72208781" y3="-1.66904323" z3="-2.66761665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9053,-.9545,-.6981;6.5731,-1.9533,-1.5917;6.0571,-.9988,-1.4496;4.7559,1.4763,-1.0894;4.2779,.3127,-.5119;2.6386,2.7433,-1.1334;3.9942,2.7365,-.8565;2.3842,4.9979,-.3415;1.801,3.8598,-.8464;1.7643,5.8742,-.1274;2.058,1.6208,-1.6489;3.131,.3652,.2264;1.7022,.39,-.6061;.6137,.7343,.3423;1.639,-.8494,-1.4708;1.0993,-2.477,-1.2984;2.1417,-5.5064,-6.219;1.8513,-5.0702,-5.2589;1.0941,-3.925,-2.821;1.8123,-3.6896,-5.1155;1.5389,-5.895,-4.1753;1.175,-5.3162,-2.966;1.4425,-3.0851,-3.9033;2.0623,-3.0237,-5.9451;1.5928,-6.9828,-4.2652;.9708,-5.9482,-2.0974;.6693,-3.3748,-1.5847;-.3356,-3.8624,-.8496;-.6719,-4.8661,-1.1221;-.3912,-3.5592,.5976;-.4565,-3.0856,3.3558;-.7139,-4.5933,1.4851;-.1209,-2.2839,1.1025;-.1499,-2.0494,2.4729;-.7378,-4.3586,2.8586;-.9031,-5.6013,1.1026;.1025,-1.4459,.4427;.0769,-1.0433,2.835;-.955,-5.1826,3.5437;-.468,-2.9056,4.4348;1.3938,-1.7495,-3.8789;1.496,-1.3382,-2.9747;.3277,3.7263,-.9817;-2.1189,-3.0035,-1.7278;-2.9176,-3.1694,-.5929;-3.1189,-2.2844,.3279;-3.8377,-.7124,.5701;-4.6417,-.2118,-1.0382;-2.5309,.4328,1.2157;-5.1309,-1.0468,1.879;-3.4067,-4.3772,-.351;-4.1373,-4.6028,.8452;-3.9176,.126,-1.7961;-5.3327,.6305,-.8513;-5.2309,-1.0418,-1.4695;-1.6318,.5437,.5832;-2.1885,.0923,2.2095;-2.9914,1.4306,1.3381;-5.594,-.0964,2.2007;-5.9385,-1.7022,1.5064;-4.6802,-1.5207,2.7701;-5.0712,-4.0174,.8467;-3.5345,-4.3428,1.7288;-4.3722,-5.6752,.8467;4.2769,-2.1943,-.1716;4.1404,-3.3044,-1.0178;3.502,-4.461,-.5864;3.0016,-4.5017,.7093;3.1465,-3.4317,1.5873;3.779,-2.2791,1.1387;4.4962,-3.2458,-2.0496;3.3661,-5.3112,-1.2553;2.262,-5.6846,1.1516;2.7387,-3.501,2.5968;3.8703,-1.4239,1.8096;-.483,4.0143,.1255;-1.8568,3.8157,.0756;-2.4153,3.3258,-1.0971;-1.6448,3.062,-2.2291;-.271,3.2567,-2.1604;-.0193,4.3535,1.0561;-2.492,4.0126,.9389;-3.8559,3.0594,-1.145;-2.1206,2.6916,-3.1363;.3495,3.0215,-3.0269;2.1611,-5.8801,2.3417;1.7733,-6.3983,.2947;-4.3604,2.8429,-2.2247;-4.4644,3.049,-.0907;6.5845,.158,-2.0794;5.9125,1.4061,-1.9324;7.747,.0823,-2.8954;8.2099,1.1863,-3.5673;8.2599,-.8799,-2.989;9.101,1.1156,-4.1971;6.4003,2.5235,-2.6663;7.5175,2.4165,-3.4592;5.8708,3.4763,-2.6019;7.8709,3.2882,-4.0171;4.584,3.9038,-.2682;3.7723,5.0558,-.0512;5.9437,3.9527,.1507;6.4759,5.0948,.6992;6.5693,3.065,.039;7.5235,5.1062,1.0139;4.3551,6.2274,.5066;5.6794,6.2531,.8679;3.7222,7.1082,.6544;6.1165,7.1579,1.2994;-2.3223,-3.9615,-2.8842;-2.5137,-4.9927,-2.5509;-3.1839,-3.6402,-3.4987;-1.4373,-3.9664,-3.5404;-1.6757,-1.6192,-2.1166;-2.4075,-1.1485,-2.8015;-1.5121,-.9569,-1.2562;-.7221,-1.669,-2.6676;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662852933841</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006805097053 0.000763175167 0.016763024992 0.005337165846</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056691001 -0.002727060 0.000150279 0.000261707 0.000330217 0.000397715 0.000403614 0.000514172 0.000564283 0.000646444 0.000769675 0.000877796 0.001055846 0.001114845 0.001273714 0.001313196 0.001327994 0.001497155 0.001571495 0.001772927 0.001922754 0.002170328 0.002325760 0.002876154 0.003089896 0.003361143 0.003720835 0.003837786 0.004088325 0.004564908 0.004871826 0.005122214 0.005520304 0.005937607 0.005968953 0.006526660 0.006796226 0.007078320 0.007352094 0.007905955 0.008161678 0.008743257 0.009432367 0.009678604 0.010465142 0.010947247 0.011004129 0.011807681 0.013009087 0.013185042 0.013675574 0.014521504 0.014666894 0.015384161 0.015630930 0.015719579 0.016392655 0.016639528 0.017830657 0.018319192 0.019535996 0.020222651 0.020748598 0.021435950 0.021948041 0.022655381 0.023290079 0.023413513 0.024420325 0.025800416 0.026190334 0.026463389 0.026849413 0.027030285 0.027889214 0.028576369 0.030082966 0.030457087 0.032415830 0.032731333 0.034288900 0.035351601 0.038709541 0.038993757 0.041168091 0.041742213 0.045330940 0.045484603 0.046112609 0.048416897 0.049646409 0.050087354 0.051518727 0.051822157 0.051954714 0.052282586 0.052377285 0.052628947 0.053284950 0.055170697 0.055942693 0.056144709 0.056537979 0.056929840 0.057205032 0.057953034 0.058675318 0.059233648 0.060505295 0.060877034 0.061675829 0.062712300 0.064053614 0.064742555 0.064960712 0.066330856 0.067369452 0.068323665 0.068713014 0.071623761 0.071845366 0.072387400 0.072848082 0.075097101 0.076656486 0.080148569 0.081009589 0.082756579 0.083053670 0.085958710 0.088140074 0.089052658 0.089654509 0.091217229 0.093183346 0.094333919 0.095348605 0.095911297 0.096775952 0.097912862 0.099762533 0.100223801 0.101298641 0.102097255 0.103063575 0.103477743 0.104505806 0.107724329 0.110109354 0.111330904 0.111661695 0.112422553 0.113445903 0.115791553 0.116488903 0.116828025 0.118383945 0.119163396 0.121667396 0.124466985 0.124988262 0.127854789 0.128056853 0.129774246 0.133371404 0.135676571 0.137055373 0.138437527 0.139424438 0.141552571 0.143381215 0.145431449 0.146131131 0.151532070 0.152037168 0.153173238 0.159305569 0.160556508 0.166525564 0.171127785 0.174759261 0.178496215 0.181093940 0.183670595 0.186957398 0.188304101 0.190083415 0.198525950 0.201900865 0.205459166 0.206529106 0.207174028 0.209110383 0.211173282 0.212407323 0.213253882 0.216154001 0.217869543 0.220200014 0.222420197 0.225271080 0.231723620 0.232817054 0.234570145 0.237994143 0.244674540 0.247045744 0.249902277 0.255390233 0.256287515 0.257134415 0.261925302 0.271435656 0.282239507 0.291617158 0.298999313 0.299589664 0.300631001 0.306697444 0.307660004 0.308972285 0.318199416 0.321092205 0.326096041 0.327867379 0.333979848 0.347184269 0.351238224 0.355501446 0.358853587 0.359430626 0.363955278 0.383711404 0.406389023 0.411582045 0.429944013 0.430807645 0.432140398 0.446160590 0.462963844 0.464843153 0.470061850 0.477890090 0.485163010 0.498061371 0.500488160 0.513537267 0.515760568 0.543106449 0.565498907 0.567247942 0.583981871 0.591631605 0.605573920 0.641276529 0.644942211 0.665656693 0.674815281 0.685407706 0.691861395 0.699605766 0.700953497 0.704248662 0.716080664 0.725913387 0.735666989 0.737904013 0.746599703 0.750719662 0.771598547 0.775942474 0.805981798 0.817833061 0.821414558 0.827851068 0.833336008 0.845468807 0.846768314 0.847238924 0.852960386 0.859479258 0.867369222 0.874088539 0.877003361 0.881150938 0.886823981 0.891083707 0.898045708 0.901279068 0.914775345 0.917457822 0.924353197 0.924702730 0.931699436 0.939580739 0.954857589 0.959250815 0.969282289 0.974731490 0.982114094 0.998496332 1.004030007 1.012771943 1.018613291 1.038906799 1.049162637 1.055338304 1.068727340 1.076555497 1.086996225 1.102323722 1.110236122 1.111542436 1.117776150 1.122493827 1.123495367 1.134674707 1.145004915 1.161371777 1.169919900 1.173969980 1.176391275 1.200550320 1.218257534 1.229482685 1.247348284 1.295402041 1.296238039 1.314495897 1.326199989 1.326506995 1.329303609 1.330163326 1.334623009 1.341092937 1.346266717 1.362525880 1.378812575 1.380933658 1.381524187 1.418599109 1.509137189 1.557855404 1.671902818 1.914199966</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">131</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90536351" y3="-0.95518574" z3="-0.69762393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57455421" y3="-1.95363092" z3="-1.58885157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05861734" y3="-0.99911994" z3="-1.44676336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75744322" y3="1.47593835" z3="-1.08661404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27779683" y3="0.31181665" z3="-0.51126499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64046121" y3="2.74301736" z3="-1.13480186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99542716" y3="2.7360416" z3="-0.85448841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38430381" y3="4.99702465" z3="-0.34267704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8019616" y3="3.85927648" z3="-0.84934055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76389369" y3="5.87315941" z3="-0.13012887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06151458" y3="1.62065157" z3="-1.65237496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12933551" y3="0.36360881" z3="0.22466161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70234963" y3="0.38959507" z3="-0.61098659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6118409" y3="0.73467739" z3="0.33489773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64008841" y3="-0.84928459" z3="-1.47632547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09808617" y3="-2.47680095" z3="-1.30144018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.12739014" y3="-5.50483366" z3="-6.22569969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.83991231" y3="-5.06877451" z3="-5.26472467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08934385" y3="-3.92379048" z3="-2.82461832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.80083361" y3="-3.68817594" z3="-5.12125101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.53112225" y3="-5.89358473" z3="-4.18012633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17059124" y3="-5.31494246" z3="-2.96981826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.43417672" y3="-3.08372198" z3="-3.90802051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.04796369" y3="-3.02221725" z3="-5.95166627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.58526374" y3="-6.98140221" z3="-4.27019576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9689427" y3="-5.94680496" z3="-2.10066807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66710166" y3="-3.3738614" z3="-1.58740215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33750777" y3="-3.86063371" z3="-0.85055029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.673195" y3="-4.86500437" z3="-1.12163334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38865909" y3="-3.55766931" z3="0.597029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44614178" y3="-3.08094361" z3="3.35503912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70452902" y3="-4.592429" z3="1.48703138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12109736" y3="-2.2799792" z3="1.09923154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14660505" y3="-2.04380512" z3="2.46944557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72481143" y3="-4.35607423" z3="2.86044679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8940666" y3="-5.59972599" z3="1.10583583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09397264" y3="-1.43985451" z3="0.43592086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0764051" y3="-1.03471281" z3="2.82875699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93830253" y3="-5.17963869" z3="3.54703385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45611892" y3="-2.89881892" z3="4.4337024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.38451611" y3="-1.74807048" z3="-3.88340169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49033569" y3="-1.3374389" z3="-2.97980579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32909544" y3="3.72556012" z3="-0.98774287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11952354" y3="-3.00417975" z3="-1.72565018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91753981" y3="-3.16831901" z3="-0.58929112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11776663" y3="-2.28307197" z3="0.33105833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83710942" y3="-0.71211227" z3="0.57391375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64861768" y3="-0.21635538" z3="-1.03109674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53049898" y3="0.43683385" z3="1.21442325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1281212" y3="-1.04790956" z3="1.88789652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40588952" y3="-4.37571771" z3="-0.34632975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1325431" y3="-4.60207615" z3="0.85206415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.92760286" y3="0.1181054" z3="-1.79351778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33717015" y3="0.62759424" z3="-0.84401888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.24030634" y3="-1.04699447" z3="-1.45574663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6302056" y3="0.54856959" z3="0.58124235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1856326" y3="0.10143267" z3="2.20779558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99139826" y3="1.43466997" z3="1.33366755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.58940367" y3="-0.09648538" z3="2.20898114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93603872" y3="-1.70433794" z3="1.52046109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.67236461" y3="-1.51918897" z3="2.77559847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0674125" y3="-4.01808223" z3="0.85642945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52675702" y3="-4.34038006" z3="1.73355102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36550286" y3="-5.67541968" z3="0.85541808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27585482" y3="-2.19527553" z3="-0.17314846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13914245" y3="-3.30410519" z3="-1.02088362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50084241" y3="-4.46125609" z3="-0.59096941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00126065" y3="-4.50390512" z3="0.70500994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14584588" y3="-3.43485182" z3="1.58428504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77770343" y3="-2.28151197" z3="1.13698585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49491499" y3="-3.2439219" z3="-2.05269075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36485741" y3="-5.31051249" z3="-1.26100906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2633855" y3="-5.6882452" z3="1.14646449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73839588" y3="-3.5057246" z3="2.59383005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86869559" y3="-1.42690902" z3="1.80865784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48496236" y3="4.01797493" z3="0.11337751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85785423" y3="3.81560213" z3="0.06385647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41579229" y3="3.32563556" z3="-1.1138609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63955477" y3="3.05436793" z3="-2.23598733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26650582" y3="3.2509956" z3="-2.16486346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02699759" y3="4.36377427" z3="1.04164352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49313347" y3="4.01184694" z3="0.92996237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85376803" y3="3.05301895" z3="-1.15796746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11458696" y3="2.68331486" z3="-3.14615736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35528143" y3="3.01619915" z3="-3.0311116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16527061" y3="-5.88642814" z3="2.33656802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77345606" y3="-6.40043356" z3="0.28901511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35617133" y3="2.83068299" z3="-2.23912495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46491892" y3="3.04897091" z3="-0.10610646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58783533" y3="0.15828115" z3="-2.07401679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91594679" y3="1.40636406" z3="-1.92709292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.75225256" y3="0.08314658" z3="-2.88737575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.21734691" y3="1.18785531" z3="-3.55661226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.26494588" y3="-0.87913961" z3="-2.98092428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.11010184" y3="1.11765583" z3="-4.18417209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4058365" y3="2.52449195" z3="-2.65860818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.52508508" y3="2.41806394" z3="-3.44881599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87635615" y3="3.47726848" z3="-2.59483686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88027138" y3="3.29040823" z3="-4.00469878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58391949" y3="3.90288176" z3="-0.26409354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77165215" y3="5.05460839" z3="-0.04900234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94228318" y3="3.95184521" z3="0.15855408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47266207" y3="5.09361238" z3="0.70943895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56833571" y3="3.06449088" z3="0.04822466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51894704" y3="5.10527455" z3="1.02733138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35290732" y3="6.2257899" z3="0.51076294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67576698" y3="6.25150816" z3="0.87623294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71962789" y3="7.10611421" z3="0.65658547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11140123" y3="7.15602908" z3="1.30962316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32597818" y3="-3.96366721" z3="-2.88097535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51279653" y3="-4.99574679" z3="-2.54468441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19210425" y3="-3.64668323" z3="-3.49405354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44322307" y3="-3.96594278" z3="-3.53984585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67792699" y3="-1.62055474" z3="-2.11845335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41082475" y3="-1.15027325" z3="-2.79501693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51984181" y3="-0.94751968" z3="-1.25588298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.726349" y3="-1.66681193" z3="-2.67028149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9054,-.9552,-.6976;6.5746,-1.9536,-1.5889;6.0586,-.9991,-1.4468;4.7574,1.4759,-1.0866;4.2778,.3118,-.5113;2.6405,2.743,-1.1348;3.9954,2.736,-.8545;2.3843,4.997,-.3427;1.802,3.8593,-.8493;1.7639,5.8732,-.1301;2.0615,1.6207,-1.6524;3.1293,.3636,.2247;1.7023,.3896,-.611;.6118,.7347,.3349;1.6401,-.8493,-1.4763;1.0981,-2.4768,-1.3014;2.1274,-5.5048,-6.2257;1.8399,-5.0688,-5.2647;1.0893,-3.9238,-2.8246;1.8008,-3.6882,-5.1213;1.5311,-5.8936,-4.1801;1.1706,-5.3149,-2.9698;1.4342,-3.0837,-3.908;2.048,-3.0222,-5.9517;1.5853,-6.9814,-4.2702;.9689,-5.9468,-2.1007;.6671,-3.3739,-1.5874;-.3375,-3.8606,-.8506;-.6732,-4.865,-1.1216;-.3887,-3.5577,.597;-.4461,-3.0809,3.355;-.7045,-4.5924,1.487;-.1211,-2.28,1.0992;-.1466,-2.0438,2.4694;-.7248,-4.3561,2.8604;-.8941,-5.5997,1.1058;.094,-1.4399,.4359;.0764,-1.0347,2.8288;-.9383,-5.1796,3.547;-.4561,-2.8988,4.4337;1.3845,-1.7481,-3.8834;1.4903,-1.3374,-2.9798;.3291,3.7256,-.9877;-2.1195,-3.0042,-1.7257;-2.9175,-3.1683,-.5893;-3.1178,-2.2831,.3311;-3.8371,-.7121,.5739;-4.6486,-.2164,-1.0311;-2.5305,.4368,1.2144;-5.1281,-1.0479,1.8879;-3.4059,-4.3757,-.3463;-4.1325,-4.6021,.8521;-3.9276,.1181,-1.7935;-5.3372,.6276,-.844;-5.2403,-1.047,-1.4557;-1.6302,.5486,.5812;-2.1856,.1014,2.2078;-2.9914,1.4347,1.3337;-5.5894,-.0965,2.209;-5.936,-1.7043,1.5205;-4.6724,-1.5192,2.7756;-5.0674,-4.0181,.8564;-3.5268,-4.3404,1.7336;-4.3655,-5.6754,.8554;4.2759,-2.1953,-.1731;4.1391,-3.3041,-1.0209;3.5008,-4.4613,-.591;3.0013,-4.5039,.705;3.1458,-3.4349,1.5843;3.7777,-2.2815,1.137;4.4949,-3.2439,-2.0527;3.3649,-5.3105,-1.261;2.2634,-5.6882,1.1465;2.7384,-3.5057,2.5938;3.8687,-1.4269,1.8087;-.485,4.018,.1134;-1.8579,3.8156,.0639;-2.4158,3.3256,-1.1139;-1.6396,3.0544,-2.236;-.2665,3.251,-2.1649;-.027,4.3638,1.0416;-2.4931,4.0118,.93;-3.8538,3.053,-1.158;-2.1146,2.6833,-3.1462;.3553,3.0162,-3.0311;2.1653,-5.8864,2.3366;1.7735,-6.4004,.289;-4.3562,2.8307,-2.2391;-4.4649,3.049,-.1061;6.5878,.1583,-2.074;5.9159,1.4064,-1.9271;7.7523,.0831,-2.8874;8.2173,1.1879,-3.5566;8.2649,-.8791,-2.9809;9.1101,1.1177,-4.1842;6.4058,2.5245,-2.6586;7.5251,2.4181,-3.4488;5.8764,3.4773,-2.5948;7.8803,3.2904,-4.0047;4.5839,3.9029,-.2641;3.7717,5.0546,-.049;5.9423,3.9518,.1586;6.4727,5.0936,.7094;6.5683,3.0645,.0482;7.5189,5.1053,1.0273;4.3529,6.2258,.5108;5.6758,6.2515,.8762;3.7196,7.1061,.6566;6.1114,7.156,1.3096;-2.326,-3.9637,-2.881;-2.5128,-4.9957,-2.5447;-3.1921,-3.6467,-3.4941;-1.4432,-3.9659,-3.5398;-1.6779,-1.6206,-2.1185;-2.4108,-1.1503,-2.795;-1.5198,-.9475,-1.2559;-.7263,-1.6668,-2.6703;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662862344445</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005068271496 0.000717835603 0.019285466046 0.005338498294</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056726787 -0.002541363 0.000157020 0.000261553 0.000330321 0.000398009 0.000404114 0.000514543 0.000564203 0.000647194 0.000769797 0.000880050 0.001058569 0.001115114 0.001275936 0.001313908 0.001330351 0.001496890 0.001573982 0.001774383 0.001976443 0.002173991 0.002325898 0.002886657 0.003096473 0.003376634 0.003725048 0.003841705 0.004093274 0.004566022 0.004871905 0.005126085 0.005530919 0.005938306 0.005973460 0.006526302 0.006806654 0.007079904 0.007352292 0.007915121 0.008165203 0.008743585 0.009432896 0.009678603 0.010494873 0.010969790 0.011004731 0.011807556 0.013009536 0.013187922 0.013689383 0.014523850 0.014708702 0.015393293 0.015632476 0.015725971 0.016393033 0.016637880 0.017840216 0.018334302 0.019537316 0.020223450 0.020884349 0.021451783 0.021961191 0.022656641 0.023290439 0.023417302 0.024422382 0.025807277 0.026217055 0.026490933 0.026849587 0.027063219 0.027889195 0.028578805 0.030092392 0.030457187 0.032416483 0.032732406 0.034289170 0.035378120 0.038712128 0.039002753 0.041244447 0.041756339 0.045333812 0.045552042 0.046122877 0.048432824 0.049646482 0.050087277 0.051518865 0.051822237 0.051956378 0.052282589 0.052378148 0.052630629 0.053299327 0.055185533 0.055942965 0.056236599 0.056538635 0.056938395 0.057224157 0.057962456 0.058696956 0.059234268 0.060528069 0.060928473 0.061692799 0.062722974 0.064084363 0.064758935 0.064960894 0.066429302 0.067373588 0.068341950 0.068713079 0.071623682 0.071902720 0.072387464 0.072854288 0.075097249 0.076657784 0.080206403 0.081009614 0.082820305 0.083100224 0.085962416 0.088161209 0.089090527 0.089665022 0.091219425 0.093183403 0.094363144 0.095352510 0.095911904 0.096777013 0.097917769 0.099793125 0.100246193 0.101298651 0.102113012 0.103066217 0.103542179 0.104582654 0.107727531 0.110255770 0.111387745 0.111669081 0.112523115 0.113454227 0.115917132 0.116511388 0.116953838 0.118388116 0.120144674 0.121716647 0.124502887 0.124989662 0.127859102 0.128097135 0.129793409 0.133397733 0.135688270 0.137127380 0.138443276 0.139558196 0.141563863 0.143381344 0.145448240 0.146131325 0.151556241 0.152159381 0.153206747 0.159314324 0.160592318 0.166555216 0.171137909 0.174767667 0.178564782 0.181101423 0.183685507 0.186983836 0.188328199 0.190166367 0.198644221 0.201900899 0.205459732 0.206546623 0.207175636 0.209116156 0.211211220 0.212407662 0.213253506 0.216190151 0.217911924 0.220232076 0.222448632 0.225286200 0.231723677 0.232816783 0.234573575 0.238064764 0.244728867 0.247049501 0.249905341 0.255395287 0.256337937 0.257136248 0.261937920 0.271435709 0.282336482 0.291617189 0.299000522 0.299638670 0.300641191 0.306765680 0.307660437 0.309107451 0.318255581 0.321092239 0.326097667 0.327873303 0.334221977 0.347204077 0.351240556 0.355505443 0.358859238 0.359430990 0.363964383 0.383722113 0.406412708 0.411583986 0.429966300 0.430848735 0.432145034 0.446212350 0.463238759 0.464897418 0.470336839 0.477890709 0.485192139 0.498061965 0.500825481 0.513555315 0.515784279 0.543109225 0.565502724 0.567248019 0.583983540 0.591636030 0.605575357 0.641375184 0.644956407 0.665662340 0.674926292 0.685408405 0.691879481 0.699788973 0.700953527 0.704248743 0.716271894 0.726453097 0.735844659 0.737910629 0.746655151 0.750722940 0.771598716 0.775942961 0.806280389 0.818026691 0.821457716 0.827874475 0.833431622 0.845475523 0.846778204 0.847277966 0.853028455 0.859521761 0.867369951 0.874090810 0.877289148 0.881530979 0.887374398 0.891238368 0.898316187 0.901938720 0.914785021 0.917466955 0.924373763 0.926090650 0.931700897 0.940011708 0.954972955 0.959258353 0.969312798 0.974760547 0.982116428 0.998496448 1.004135645 1.012787086 1.018618570 1.038907858 1.049180709 1.055341797 1.068792298 1.076563457 1.087002680 1.102404481 1.110237383 1.111555095 1.117776318 1.122493897 1.123495415 1.134695776 1.145048346 1.161373360 1.169921468 1.174038316 1.176398178 1.200550475 1.218263455 1.229659195 1.247350445 1.295402464 1.296254867 1.314512562 1.326209858 1.326528789 1.329398893 1.330163341 1.334623193 1.341095002 1.346345782 1.362543218 1.378812628 1.380933782 1.381526837 1.420262936 1.509145091 1.557856010 1.671908715 1.914688361</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">132</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90559946" y3="-0.95577935" z3="-0.69702594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57630101" y3="-1.9538789" z3="-1.58583887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06046252" y3="-0.99930998" z3="-1.44364173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75902067" y3="1.475827" z3="-1.08352986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27793452" y3="0.31114026" z3="-0.51056611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64209339" y3="2.74277075" z3="-1.13739687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99612125" y3="2.73572138" z3="-0.85273452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38383476" y3="4.99661171" z3="-0.34626136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80272949" y3="3.85897929" z3="-0.85478144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76311303" y3="5.87299096" z3="-0.13531298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06504857" y3="1.62026295" z3="-1.65681176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1277823" y3="0.36218862" z3="0.22272906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70273096" y3="0.38964503" z3="-0.61618743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61048776" y3="0.73590856" z3="0.3272474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64170559" y3="-0.84929626" z3="-1.48161128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0972433" y3="-2.4748201" z3="-1.30571518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.11252038" y3="-5.50381711" z3="-6.23235963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.82777847" y3="-5.06759537" z3="-5.27060321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08419354" y3="-3.9224209" z3="-2.82857069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.78845845" y3="-3.68691303" z3="-5.1274222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52277603" y3="-5.89231461" z3="-4.18484019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16559908" y3="-5.31359718" z3="-2.97351221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42534436" y3="-3.08245184" z3="-3.91317082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03276399" y3="-3.02103278" z3="-5.9587475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.57716296" y3="-6.98014833" z3="-4.27489482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96666114" y3="-5.94535754" z3="-2.10364029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66501808" y3="-3.3719212" z3="-1.59046651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33722622" y3="-3.85888966" z3="-0.85092922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67413007" y3="-4.86314131" z3="-1.12062299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38625306" y3="-3.55363329" z3="0.59622786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43804126" y3="-3.07616102" z3="3.3536079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69962847" y3="-4.58732338" z3="1.4867516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11918917" y3="-2.27642092" z3="1.09746025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14133222" y3="-2.04009013" z3="2.4675699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71682681" y3="-4.35066301" z3="2.85988621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88709495" y3="-5.59598426" z3="1.1066925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09653415" y3="-1.43879008" z3="0.43535941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08351541" y3="-1.03325112" z3="2.82699041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92605188" y3="-5.17458513" z3="3.54740679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44408146" y3="-2.89474011" z3="4.43226116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37506782" y3="-1.74684963" z3="-3.88839226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48526714" y3="-1.33637987" z3="-2.98518161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32985923" y3="3.72569699" z3="-0.99688914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1232347" y3="-3.0024491" z3="-1.72283874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91708576" y3="-3.16820662" z3="-0.5840952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11564017" y3="-2.28354634" z3="0.33725106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83761801" y3="-0.71229217" z3="0.57909189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.65476927" y3="-0.22034691" z3="-1.02569498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53131158" y3="0.44065404" z3="1.21090121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.12174185" y3="-1.04690211" z3="1.89821264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40222287" y3="-4.37740313" z3="-0.33842432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12673423" y3="-4.60288052" z3="0.86122464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.93691805" y3="0.11103438" z3="-1.79222943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34216359" y3="0.62453057" z3="-0.83789741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.24853041" y3="-1.05272341" z3="-1.4465888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63391596" y3="0.54882378" z3="0.57511427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18461015" y3="0.11049176" z3="2.20575769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99341289" y3="1.43873888" z3="1.32595927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.58509609" y3="-0.09613903" z3="2.21934802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93044798" y3="-1.70541396" z3="1.53425089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.66319719" y3="-1.51679013" z3="2.78748473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06281708" y3="-4.02042013" z3="0.86517193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52088728" y3="-4.338849" z3="1.74188107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35762602" y3="-5.67652434" z3="0.86574686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27496525" y3="-2.19621979" z3="-0.17480327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13795625" y3="-3.30384828" z3="-1.02412415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49987704" y3="-4.4617019" z3="-0.59558679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0012051" y3="-4.50633403" z3="0.7007087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14559492" y3="-3.43828684" z3="1.58127541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77678371" y3="-2.28407025" z3="1.13516513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49359616" y3="-3.24217115" z3="-2.05589753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36361518" y3="-5.31007676" z3="-1.26676074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26456034" y3="-5.69173133" z3="1.14111457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73862733" y3="-3.51057957" z3="2.59092259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86760552" y3="-1.43016148" z3="1.80773832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48623568" y3="4.01925876" z3="0.10498789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85900914" y3="3.81624379" z3="0.05243965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41261644" y3="3.31974015" z3="-1.12182393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63625969" y3="3.0500174" z3="-2.24748958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26334262" y3="3.24847815" z3="-2.17468344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0268727" y3="4.3640707" z3="1.03634838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49836067" y3="4.01758343" z3="0.9106769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85181887" y3="3.04768117" z3="-1.17214412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10809417" y3="2.67434456" z3="-3.15570934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36109882" y3="3.00925041" z3="-3.03594737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16814366" y3="-5.89195421" z3="2.33086263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77379656" y3="-6.4027497" z3="0.28314008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35068135" y3="2.81650278" z3="-2.25189505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46538587" y3="3.04899249" z3="-0.12102762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59152891" y3="0.15873676" z3="-2.06811661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91966366" y3="1.40688518" z3="-1.92114837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.75782332" y3="0.08415382" z3="-2.87888034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.22483573" y3="1.18946543" z3="-3.54577902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27042446" y3="-0.8781989" z3="-2.97243642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.11900159" y3="1.11966476" z3="-4.1714878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41171128" y3="2.52573703" z3="-2.65006305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.53272014" y3="2.41980422" z3="-3.43795471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88243676" y3="3.47871239" z3="-2.5861319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88942505" y3="3.2926481" z3="-3.99206427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5827116" y3="3.90232089" z3="-0.26006647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76993765" y3="5.05413104" z3="-0.04768864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93951449" y3="3.95098616" z3="0.16744301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46823389" y3="5.09258466" z3="0.72038386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56574798" y3="3.06350192" z3="0.05908221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51339335" y3="5.10396258" z3="1.04215648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34948365" y3="6.22526918" z3="0.5140886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67110478" y3="6.25067572" z3="0.88427655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71606929" y3="7.10597285" z3="0.65771174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10547238" y3="7.15513771" z3="1.31912103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33027366" y3="-3.96296132" z3="-2.87727872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51724514" y3="-4.99420106" z3="-2.54323579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19559049" y3="-3.64423084" z3="-3.48732667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44857892" y3="-3.96557144" z3="-3.53782601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.683595" y3="-1.61747978" z3="-2.11507016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41804174" y3="-1.14932345" z3="-2.79874996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51915011" y3="-0.95367905" z3="-1.25616794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73174245" y3="-1.66588918" z3="-2.66847633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9056,-.9558,-.697;6.5763,-1.9539,-1.5858;6.0605,-.9993,-1.4436;4.759,1.4758,-1.0835;4.2779,.3111,-.5106;2.6421,2.7428,-1.1374;3.9961,2.7357,-.8527;2.3838,4.9966,-.3463;1.8027,3.859,-.8548;1.7631,5.873,-.1353;2.065,1.6203,-1.6568;3.1278,.3622,.2227;1.7027,.3896,-.6162;.6105,.7359,.3272;1.6417,-.8493,-1.4816;1.0972,-2.4748,-1.3057;2.1125,-5.5038,-6.2324;1.8278,-5.0676,-5.2706;1.0842,-3.9224,-2.8286;1.7885,-3.6869,-5.1274;1.5228,-5.8923,-4.1848;1.1656,-5.3136,-2.9735;1.4253,-3.0825,-3.9132;2.0328,-3.021,-5.9587;1.5772,-6.9801,-4.2749;.9667,-5.9454,-2.1036;.665,-3.3719,-1.5905;-.3372,-3.8589,-.8509;-.6741,-4.8631,-1.1206;-.3863,-3.5536,.5962;-.438,-3.0762,3.3536;-.6996,-4.5873,1.4868;-.1192,-2.2764,1.0975;-.1413,-2.0401,2.4676;-.7168,-4.3507,2.8599;-.8871,-5.596,1.1067;.0965,-1.4388,.4354;.0835,-1.0333,2.827;-.9261,-5.1746,3.5474;-.4441,-2.8947,4.4323;1.3751,-1.7468,-3.8884;1.4853,-1.3364,-2.9852;.3299,3.7257,-.9969;-2.1232,-3.0024,-1.7228;-2.9171,-3.1682,-.5841;-3.1156,-2.2835,.3373;-3.8376,-.7123,.5791;-4.6548,-.2203,-1.0257;-2.5313,.4407,1.2109;-5.1217,-1.0469,1.8982;-3.4022,-4.3774,-.3384;-4.1267,-4.6029,.8612;-3.9369,.111,-1.7922;-5.3422,.6245,-.8379;-5.2485,-1.0527,-1.4466;-1.6339,.5488,.5751;-2.1846,.1105,2.2058;-2.9934,1.4387,1.326;-5.5851,-.0961,2.2193;-5.9304,-1.7054,1.5343;-4.6632,-1.5168,2.7875;-5.0628,-4.0204,.8652;-3.5209,-4.3388,1.7419;-4.3576,-5.6765,.8657;4.275,-2.1962,-.1748;4.138,-3.3038,-1.0241;3.4999,-4.4617,-.5956;3.0012,-4.5063,.7007;3.1456,-3.4383,1.5813;3.7768,-2.2841,1.1352;4.4936,-3.2422,-2.0559;3.3636,-5.3101,-1.2668;2.2646,-5.6917,1.1411;2.7386,-3.5106,2.5909;3.8676,-1.4302,1.8077;-.4862,4.0193,.105;-1.859,3.8162,.0524;-2.4126,3.3197,-1.1218;-1.6363,3.05,-2.2475;-.2633,3.2485,-2.1747;-.0269,4.3641,1.0363;-2.4984,4.0176,.9107;-3.8518,3.0477,-1.1721;-2.1081,2.6743,-3.1557;.3611,3.0093,-3.0359;2.1681,-5.892,2.3309;1.7738,-6.4027,.2831;-4.3507,2.8165,-2.2519;-4.4654,3.049,-.121;6.5915,.1587,-2.0681;5.9197,1.4069,-1.9211;7.7578,.0842,-2.8789;8.2248,1.1895,-3.5458;8.2704,-.8782,-2.9724;9.119,1.1197,-4.1715;6.4117,2.5257,-2.6501;7.5327,2.4198,-3.438;5.8824,3.4787,-2.5861;7.8894,3.2926,-3.9921;4.5827,3.9023,-.2601;3.7699,5.0541,-.0477;5.9395,3.951,.1674;6.4682,5.0926,.7204;6.5657,3.0635,.0591;7.5134,5.104,1.0422;4.3495,6.2253,.5141;5.6711,6.2507,.8843;3.7161,7.106,.6577;6.1055,7.1551,1.3191;-2.3303,-3.963,-2.8773;-2.5172,-4.9942,-2.5432;-3.1956,-3.6442,-3.4873;-1.4486,-3.9656,-3.5378;-1.6836,-1.6175,-2.1151;-2.418,-1.1493,-2.7987;-1.5192,-.9537,-1.2562;-.7317,-1.6659,-2.6685;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662877582126</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004447644952 0.000623433359 0.015196218148 0.005338106544</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056736467 -0.002020624 0.000156261 0.000261659 0.000330622 0.000398971 0.000405418 0.000514553 0.000565253 0.000647322 0.000770093 0.000881098 0.001059672 0.001115125 0.001276863 0.001313877 0.001331801 0.001500472 0.001573855 0.001774482 0.001982493 0.002175387 0.002326047 0.002888413 0.003116793 0.003385017 0.003725900 0.003849562 0.004093022 0.004576225 0.004872413 0.005126741 0.005531854 0.005938726 0.005974252 0.006528190 0.006806996 0.007085248 0.007353058 0.007920393 0.008175747 0.008744876 0.009434609 0.009678627 0.010500407 0.010976047 0.011005688 0.011808831 0.013009859 0.013190033 0.013698676 0.014525268 0.014747691 0.015396282 0.015634557 0.015733098 0.016393049 0.016651922 0.017848364 0.018354587 0.019537996 0.020223417 0.020916846 0.021464411 0.021960494 0.022656622 0.023290945 0.023417148 0.024424318 0.025810440 0.026237667 0.026508110 0.026849574 0.027085909 0.027890119 0.028578932 0.030097233 0.030457220 0.032417265 0.032738740 0.034289348 0.035409466 0.038714060 0.039010227 0.041314064 0.041768013 0.045333794 0.045577421 0.046137148 0.048462597 0.049646765 0.050087363 0.051518934 0.051822260 0.051957944 0.052282596 0.052378072 0.052633521 0.053307046 0.055192036 0.055952936 0.056282862 0.056540155 0.056943278 0.057244902 0.057975150 0.058708956 0.059234374 0.060527372 0.060966066 0.061711295 0.062770149 0.064104628 0.064780338 0.064966076 0.066507984 0.067391040 0.068357581 0.068713252 0.071624635 0.071917241 0.072387741 0.072858693 0.075100493 0.076658029 0.080274073 0.081010038 0.082867766 0.083163313 0.085962464 0.088191730 0.089144274 0.089680768 0.091223199 0.093183468 0.094390084 0.095354968 0.095913051 0.096776953 0.097926429 0.099813593 0.100271824 0.101299063 0.102140600 0.103068379 0.103612181 0.104621648 0.107733736 0.110334334 0.111430719 0.111682037 0.112644505 0.113458747 0.115983941 0.116516188 0.117072783 0.118391056 0.121102312 0.122015777 0.124548438 0.124991713 0.127865936 0.128166802 0.129846301 0.133434571 0.135705795 0.137215431 0.138448369 0.139642010 0.141592343 0.143386562 0.145469642 0.146131394 0.151564214 0.152256403 0.153224483 0.159313808 0.160637948 0.166596688 0.171140097 0.174768264 0.178608950 0.181101416 0.183689314 0.187063333 0.188341722 0.190235387 0.198781611 0.201901011 0.205462577 0.206551830 0.207176239 0.209124150 0.211212901 0.212407770 0.213262270 0.216218640 0.217974104 0.220242593 0.222484640 0.225298772 0.231723774 0.232827301 0.234574455 0.238094088 0.244794341 0.247049535 0.249905516 0.255400191 0.256354509 0.257138774 0.261970911 0.271436155 0.282345315 0.291617303 0.299016424 0.299655316 0.300652977 0.306819829 0.307661328 0.309149596 0.318280109 0.321093026 0.326097694 0.327876814 0.334280598 0.347209738 0.351240928 0.355506131 0.358879418 0.359431044 0.363967184 0.383731934 0.406424782 0.411584354 0.429972029 0.430896022 0.432146089 0.446272184 0.463363238 0.464965675 0.470405037 0.477890914 0.485234549 0.498063194 0.501034505 0.513583200 0.515812199 0.543110934 0.565504007 0.567248037 0.583996372 0.591648806 0.605579055 0.641521895 0.644966443 0.665663889 0.675012160 0.685411726 0.691882585 0.700098360 0.700953928 0.704248798 0.716449762 0.727403949 0.736011616 0.737915331 0.746659168 0.750726700 0.771599123 0.775942954 0.806503925 0.818205491 0.821477339 0.827885688 0.833468757 0.845476183 0.846778703 0.847313517 0.853123760 0.859581555 0.867371112 0.874118431 0.877621119 0.881911320 0.887780850 0.891405259 0.898503733 0.902438062 0.914786306 0.917467966 0.924377278 0.927639113 0.931706961 0.940636706 0.955086787 0.959272683 0.969344187 0.974772059 0.982119249 0.998496463 1.004183615 1.012797101 1.018632763 1.038910878 1.049192713 1.055344165 1.068861792 1.076564662 1.087006915 1.102587359 1.110237465 1.111555534 1.117776761 1.122493984 1.123495511 1.134734405 1.145179597 1.161373517 1.169923227 1.174144356 1.176413242 1.200550702 1.218282703 1.229802504 1.247350910 1.295422415 1.296262177 1.314517948 1.326211089 1.326531168 1.329450214 1.330163309 1.334624458 1.341103348 1.346434974 1.362546211 1.378812683 1.380933856 1.381526960 1.420771960 1.509151755 1.557856053 1.671910310 1.914894949</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">133</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90543159" y3="-0.95620331" z3="-0.69632136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57785954" y3="-1.95398972" z3="-1.5820377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06200738" y3="-0.9993892" z3="-1.44027315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76045577" y3="1.47569699" z3="-1.08097296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27758694" y3="0.31063011" z3="-0.5102012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64387376" y3="2.74272874" z3="-1.13986784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99711659" y3="2.73555243" z3="-0.85155561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38290508" y3="4.99654829" z3="-0.34817694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80353824" y3="3.85885937" z3="-0.85853422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7614465" y3="5.87280492" z3="-0.13897448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06831052" y3="1.62033245" z3="-1.66122476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12570381" y3="0.36113809" z3="0.22046934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70248835" y3="0.38990485" z3="-0.62155079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60849048" y3="0.73728484" z3="0.31952408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64215832" y3="-0.84884031" z3="-1.48732324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09601942" y3="-2.47375802" z3="-1.30965172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.09732416" y3="-5.50324123" z3="-6.23911341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.81567897" y3="-5.06692709" z3="-5.27651232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0797641" y3="-3.92143368" z3="-2.83227315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77673074" y3="-3.68628543" z3="-5.13340477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.51436876" y3="-5.89147469" z3="-4.18959674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16098131" y3="-5.31257522" z3="-2.97728678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41761492" y3="-3.08161507" z3="-3.91805775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01815685" y3="-3.02051482" z3="-5.96566639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56865668" y3="-6.97930138" z3="-4.27954877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96468948" y3="-5.94414833" z3="-2.10667577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.663546" y3="-3.37129646" z3="-1.59306549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33753879" y3="-3.85802449" z3="-0.85168544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67437643" y3="-4.86266081" z3="-1.12027925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38308933" y3="-3.55280316" z3="0.59561679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42829428" y3="-3.0715211" z3="3.35321913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69144637" y3="-4.58676859" z3="1.48875774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11701976" y3="-2.27391908" z3="1.09465818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13638521" y3="-2.03535759" z3="2.46457439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70548822" y3="-4.34817421" z3="2.86193084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87913666" y3="-5.5957067" z3="1.1102298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09188315" y3="-1.43452527" z3="0.42896396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08503359" y3="-1.02478399" z3="2.82110769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91312106" y3="-5.17100505" z3="3.55058449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43312586" y3="-2.88777844" z3="4.43164663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36747503" y3="-1.74594951" z3="-3.89356409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48033796" y3="-1.3351872" z3="-2.9905383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3314779" y3="3.7241462" z3="-1.00323108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12451542" y3="-3.0026143" z3="-1.72022667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91678628" y3="-3.16780552" z3="-0.58032902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11476879" y3="-2.28153891" z3="0.34013635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83822799" y3="-0.71249195" z3="0.58254525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66263074" y3="-0.22606384" z3="-1.01863721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53180987" y3="0.44474627" z3="1.20851677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11628002" y3="-1.04732197" z3="1.90767498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40201497" y3="-4.37565885" z3="-0.33433175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12204035" y3="-4.60281299" z3="0.86816145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.94763996" y3="0.10222631" z3="-1.78944132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34734414" y3="0.62124016" z3="-0.83181986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.26030166" y3="-1.05764501" z3="-1.43305702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63432041" y3="0.55265215" z3="0.57168263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18365608" y3="0.11811439" z3="2.20423546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99447618" y3="1.44249788" z3="1.32068198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57987189" y3="-0.09758961" z3="2.22973779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92387228" y3="-1.70903287" z3="1.54784437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.65220449" y3="-1.51335737" z3="2.79430697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05815927" y3="-4.02124521" z3="0.87700583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51268758" y3="-4.3393109" z3="1.7462795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35266044" y3="-5.67624489" z3="0.87334857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27384905" y3="-2.19707148" z3="-0.17619207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13655322" y3="-3.30336244" z3="-1.02718121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49875232" y3="-4.46190176" z3="-0.60014538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00102405" y3="-4.50865819" z3="0.69643972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1453928" y3="-3.44186681" z3="1.57846368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77590837" y3="-2.28677224" z3="1.13369628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49201703" y3="-3.24007398" z3="-2.05890732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.362252" y3="-5.3093112" z3="-1.27248651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26566235" y3="-5.69524787" z3="1.13573005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73903527" y3="-3.51582276" z3="2.58823012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86667947" y3="-1.43367835" z3="1.8073326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48737291" y3="4.02084991" z3="0.09387689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86021628" y3="3.81771912" z3="0.03834341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41170246" y3="3.31727428" z3="-1.13594539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63162615" y3="3.04338218" z3="-2.25599879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25924625" y3="3.24394595" z3="-2.18127379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03337918" y3="4.3720634" z3="1.0222233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49951944" y3="4.01814614" z3="0.90053947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84923501" y3="3.04083604" z3="-1.1847056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10147337" y3="2.66462592" z3="-3.1645005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36530542" y3="3.00726923" z3="-3.04590433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1705791" y3="-5.8972812" z3="2.32526487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77455942" y3="-6.40539484" z3="0.2772355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34564293" y3="2.80210185" z3="-2.26468506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46527281" y3="3.04849917" z3="-0.13536952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59501133" y3="0.15910275" z3="-2.06227075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92322422" y3="1.40727521" z3="-1.91567786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76336454" y3="0.08504998" z3="-2.87002299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23254993" y3="1.19100424" z3="-3.53431194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27584173" y3="-0.87737232" z3="-2.96327128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.12830961" y3="1.12163146" z3="-4.15766602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41764784" y3="2.5268384" z3="-2.6419163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54070381" y3="2.42148926" z3="-3.42681782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88871805" y3="3.47996322" z3="-2.5782359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.89926233" y3="3.29495584" z3="-3.97873823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58185862" y3="3.90193684" z3="-0.25671399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76839977" y3="5.05386038" z3="-0.04583115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93763691" y3="3.95001393" z3="0.17454264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46502703" y3="5.09121259" z3="0.72959826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56396801" y3="3.06227386" z3="0.06737614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50956656" y3="5.10202021" z3="1.05402784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34635576" y3="6.22456631" z3="0.51883878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66718982" y3="6.24941115" z3="0.89257528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71230493" y3="7.10530313" z3="0.66212523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10038646" y3="7.1535227" z3="1.32947674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33477753" y3="-3.96104675" z3="-2.87473905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52107519" y3="-4.99279116" z3="-2.53827258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20229314" y3="-3.64284079" z3="-3.48363866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45450375" y3="-3.96400867" z3="-3.53709867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68526888" y3="-1.61912459" z3="-2.11493483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41932294" y3="-1.15009439" z3="-2.7914359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52654823" y3="-0.94549575" z3="-1.25357104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73357851" y3="-1.66547165" z3="-2.66794825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9054,-.9562,-.6963;6.5779,-1.954,-1.582;6.062,-.9994,-1.4403;4.7605,1.4757,-1.081;4.2776,.3106,-.5102;2.6439,2.7427,-1.1399;3.9971,2.7356,-.8516;2.3829,4.9965,-.3482;1.8035,3.8589,-.8585;1.7614,5.8728,-.139;2.0683,1.6203,-1.6612;3.1257,.3611,.2205;1.7025,.3899,-.6216;.6085,.7373,.3195;1.6422,-.8488,-1.4873;1.096,-2.4738,-1.3097;2.0973,-5.5032,-6.2391;1.8157,-5.0669,-5.2765;1.0798,-3.9214,-2.8323;1.7767,-3.6863,-5.1334;1.5144,-5.8915,-4.1896;1.161,-5.3126,-2.9773;1.4176,-3.0816,-3.9181;2.0182,-3.0205,-5.9657;1.5687,-6.9793,-4.2795;.9647,-5.9441,-2.1067;.6635,-3.3713,-1.5931;-.3375,-3.858,-.8517;-.6744,-4.8627,-1.1203;-.3831,-3.5528,.5956;-.4283,-3.0715,3.3532;-.6914,-4.5868,1.4888;-.117,-2.2739,1.0947;-.1364,-2.0354,2.4646;-.7055,-4.3482,2.8619;-.8791,-5.5957,1.1102;.0919,-1.4345,.429;.085,-1.0248,2.8211;-.9131,-5.171,3.5506;-.4331,-2.8878,4.4316;1.3675,-1.7459,-3.8936;1.4803,-1.3352,-2.9905;.3315,3.7241,-1.0032;-2.1245,-3.0026,-1.7202;-2.9168,-3.1678,-.5803;-3.1148,-2.2815,.3401;-3.8382,-.7125,.5825;-4.6626,-.2261,-1.0186;-2.5318,.4447,1.2085;-5.1163,-1.0473,1.9077;-3.402,-4.3757,-.3343;-4.122,-4.6028,.8682;-3.9476,.1022,-1.7894;-5.3473,.6212,-.8318;-5.2603,-1.0576,-1.4331;-1.6343,.5527,.5717;-2.1837,.1181,2.2042;-2.9945,1.4425,1.3207;-5.5799,-.0976,2.2297;-5.9239,-1.709,1.5478;-4.6522,-1.5134,2.7943;-5.0582,-4.0212,.877;-3.5127,-4.3393,1.7463;-4.3527,-5.6762,.8733;4.2738,-2.1971,-.1762;4.1366,-3.3034,-1.0272;3.4988,-4.4619,-.6001;3.001,-4.5087,.6964;3.1454,-3.4419,1.5785;3.7759,-2.2868,1.1337;4.492,-3.2401,-2.0589;3.3623,-5.3093,-1.2725;2.2657,-5.6952,1.1357;2.739,-3.5158,2.5882;3.8667,-1.4337,1.8073;-.4874,4.0208,.0939;-1.8602,3.8177,.0383;-2.4117,3.3173,-1.1359;-1.6316,3.0434,-2.256;-.2592,3.2439,-2.1813;-.0334,4.3721,1.0222;-2.4995,4.0181,.9005;-3.8492,3.0408,-1.1847;-2.1015,2.6646,-3.1645;.3653,3.0073,-3.0459;2.1706,-5.8973,2.3253;1.7746,-6.4054,.2772;-4.3456,2.8021,-2.2647;-4.4653,3.0485,-.1354;6.595,.1591,-2.0623;5.9232,1.4073,-1.9157;7.7634,.085,-2.87;8.2325,1.191,-3.5343;8.2758,-.8774,-2.9633;9.1283,1.1216,-4.1577;6.4176,2.5268,-2.6419;7.5407,2.4215,-3.4268;5.8887,3.48,-2.5782;7.8993,3.295,-3.9787;4.5819,3.9019,-.2567;3.7684,5.0539,-.0458;5.9376,3.95,.1745;6.465,5.0912,.7296;6.564,3.0623,.0674;7.5096,5.102,1.054;4.3464,6.2246,.5188;5.6672,6.2494,.8926;3.7123,7.1053,.6621;6.1004,7.1535,1.3295;-2.3348,-3.961,-2.8747;-2.5211,-4.9928,-2.5383;-3.2023,-3.6428,-3.4836;-1.4545,-3.964,-3.5371;-1.6853,-1.6191,-2.1149;-2.4193,-1.1501,-2.7914;-1.5265,-.9455,-1.2536;-.7336,-1.6655,-2.6679;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662890631020</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003701604478 0.000542913253 0.016787119091 0.005337368921</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056737200 -0.001658131 0.000156108 0.000263856 0.000330645 0.000399782 0.000408331 0.000515559 0.000565002 0.000647308 0.000771755 0.000881096 0.001059924 0.001115095 0.001277048 0.001315206 0.001331820 0.001508411 0.001577197 0.001777225 0.001987232 0.002176169 0.002326031 0.002889465 0.003132916 0.003384190 0.003725944 0.003855383 0.004092763 0.004590530 0.004872711 0.005127951 0.005540536 0.005938655 0.005981578 0.006532081 0.006806950 0.007095348 0.007355568 0.007919822 0.008187880 0.008746044 0.009435831 0.009678627 0.010500817 0.010975632 0.011005807 0.011810830 0.013010343 0.013192614 0.013700924 0.014525646 0.014769168 0.015396784 0.015634892 0.015737395 0.016393135 0.016688870 0.017856569 0.018377787 0.019541656 0.020224594 0.020914775 0.021474060 0.021966231 0.022660281 0.023292271 0.023432646 0.024424909 0.025811036 0.026252971 0.026518092 0.026850592 0.027096522 0.027894205 0.028578928 0.030098969 0.030457404 0.032416811 0.032745502 0.034289570 0.035445081 0.038714317 0.039014795 0.041360718 0.041777295 0.045333927 0.045591921 0.046145489 0.048491428 0.049647113 0.050087701 0.051518950 0.051822255 0.051960254 0.052282673 0.052378433 0.052635264 0.053310599 0.055192306 0.055975745 0.056300684 0.056542141 0.056945359 0.057255748 0.057987657 0.058709958 0.059234376 0.060536302 0.060970981 0.061715319 0.062818792 0.064115443 0.064796532 0.064982610 0.066560519 0.067412660 0.068380587 0.068713833 0.071626473 0.071917118 0.072388073 0.072860667 0.075100698 0.076660423 0.080321737 0.081010952 0.082890194 0.083200419 0.085963475 0.088232058 0.089189957 0.089698513 0.091224847 0.093183991 0.094407947 0.095356524 0.095915995 0.096777083 0.097934887 0.099819515 0.100292902 0.101301951 0.102182606 0.103068725 0.103666857 0.104627511 0.107740634 0.110369008 0.111441152 0.111699174 0.112725058 0.113463130 0.116011659 0.116517731 0.117128861 0.118392797 0.121426381 0.122997587 0.124660187 0.124995316 0.127864910 0.128232283 0.129924765 0.133472231 0.135712811 0.137258286 0.138449338 0.139672317 0.141622274 0.143393359 0.145485991 0.146131506 0.151563948 0.152320407 0.153226576 0.159317126 0.160671568 0.166651854 0.171140132 0.174768514 0.178626516 0.181103403 0.183689224 0.187110443 0.188352132 0.190258855 0.198868059 0.201903017 0.205475108 0.206552511 0.207176292 0.209129527 0.211214543 0.212409111 0.213287512 0.216228136 0.218051100 0.220242047 0.222568773 0.225305847 0.231724227 0.232850888 0.234574463 0.238096001 0.244813956 0.247049894 0.249907362 0.255403154 0.256356378 0.257140524 0.262013891 0.271436485 0.282351279 0.291617306 0.299069237 0.299657044 0.300665082 0.306850906 0.307662154 0.309149165 0.318290620 0.321094203 0.326098827 0.327886051 0.334278654 0.347210255 0.351241947 0.355506311 0.358911633 0.359432827 0.363967197 0.383745239 0.406432787 0.411588207 0.429972016 0.430898611 0.432168210 0.446344950 0.463398475 0.465020759 0.470403659 0.477890973 0.485294970 0.498064555 0.501163098 0.513613457 0.515841079 0.543111891 0.565504008 0.567248046 0.584012396 0.591660832 0.605583054 0.641604456 0.644968800 0.665663909 0.675037873 0.685413937 0.691884034 0.700320913 0.701009463 0.704248931 0.716545148 0.728317724 0.736174983 0.737917214 0.746668765 0.750728885 0.771599488 0.775943418 0.806627634 0.818323215 0.821478405 0.827886596 0.833469325 0.845480270 0.846793401 0.847316239 0.853203500 0.859641631 0.867372154 0.874212878 0.878067242 0.882242515 0.888049971 0.891519662 0.898671585 0.902788828 0.914791197 0.917470790 0.924379175 0.928796776 0.931716580 0.941271850 0.955192891 0.959290092 0.969389119 0.974815019 0.982119421 0.998496471 1.004194227 1.012799874 1.018650570 1.038916694 1.049193104 1.055344508 1.068911281 1.076565475 1.087007787 1.102776015 1.110237541 1.111558631 1.117777543 1.122494173 1.123495795 1.134776730 1.145376695 1.161373515 1.169924466 1.174260666 1.176431147 1.200550839 1.218299887 1.229901769 1.247351227 1.295457492 1.296265040 1.314518916 1.326211413 1.326531808 1.329468239 1.330163396 1.334624743 1.341110799 1.346460522 1.362546313 1.378812745 1.380934171 1.381529102 1.420793077 1.509194609 1.557856368 1.671911095 1.914959107</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">134</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90606236" y3="-0.9567656" z3="-0.69522216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58014216" y3="-1.95417294" z3="-1.57823936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0642947" y3="-0.99952948" z3="-1.43659247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76222733" y3="1.47546797" z3="-1.07785205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27799858" y3="0.3099462" z3="-0.50919561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64565778" y3="2.74226376" z3="-1.14214011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99809873" y3="2.7351257" z3="-0.84981348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38285358" y3="4.99587" z3="-0.35219792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80444492" y3="3.85829208" z3="-0.86402544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7609197" y3="5.87225388" z3="-0.14457875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07204878" y3="1.61966304" z3="-1.66507887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12444642" y3="0.35972331" z3="0.21893123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70333163" y3="0.38922191" z3="-0.62647006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60721858" y3="0.73715698" z3="0.31194324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6447078" y3="-0.84942466" z3="-1.49239841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09524399" y3="-2.47337128" z3="-1.31276355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.08231962" y3="-5.50175365" z3="-6.24570001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8035316" y3="-5.06544048" z3="-5.28226016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07425985" y3="-3.92006261" z3="-2.83604915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76499698" y3="-3.68475237" z3="-5.13901021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50537284" y3="-5.89001187" z3="-4.19454276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15529637" y3="-5.31120203" z3="-2.98118984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4091375" y3="-3.0801995" z3="-3.92268983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00416164" y3="-3.01902417" z3="-5.97191984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55940264" y3="-6.97781492" z3="-4.28479156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96126735" y3="-5.94277612" z3="-2.11010068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66067833" y3="-3.36953014" z3="-1.59606599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33961775" y3="-3.85510782" z3="-0.85278586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67715123" y3="-4.85986759" z3="-1.12014912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38194889" y3="-3.54917186" z3="0.59454852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42009043" y3="-3.06710616" z3="3.35153067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68510589" y3="-4.583456" z3="1.48885393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11835537" y3="-2.26904884" z3="1.09183063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13404891" y3="-2.03027352" z3="2.46158658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69544923" y3="-4.34446201" z3="2.86185915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87053238" y3="-5.59371775" z3="1.11176409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08873133" y3="-1.43082569" z3="0.42655099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08797842" y3="-1.02134499" z3="2.81778296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89633394" y3="-5.16870927" z3="3.55253206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42118299" y3="-2.88360913" z3="4.42993466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35867758" y3="-1.74454305" z3="-3.89735805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47710105" y3="-1.33486811" z3="-2.99510256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33235371" y3="3.72418275" z3="-1.01252563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12732934" y3="-2.99986659" z3="-1.71748438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91700777" y3="-3.16678958" z3="-0.57574885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11367456" y3="-2.28292652" z3="0.34643216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83758901" y3="-0.71306317" z3="0.58872118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66788014" y3="-0.22991723" z3="-1.01169949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53171622" y3="0.44806451" z3="1.20749605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11173781" y3="-1.04786057" z3="1.91888016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39877967" y3="-4.37679162" z3="-0.3283708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11712226" y3="-4.60391556" z3="0.87449492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.95591691" y3="0.09390914" z3="-1.78682742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35081815" y3="0.61825935" z3="-0.82373751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.26721294" y3="-1.06363849" z3="-1.42106598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63507421" y3="0.55291102" z3="0.56911664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18198901" y3="0.12865204" z3="2.20456603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99653998" y3="1.44585565" z3="1.31464834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57411981" y3="-0.09657466" z3="2.2401518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92171084" y3="-1.70914507" z3="1.56428749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6445397" y3="-1.51383908" z3="2.80489269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05446363" y3="-4.02355834" z3="0.88300957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50757195" y3="-4.33813257" z3="1.75217755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34524719" y3="-5.67832704" z3="0.88055014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27328866" y3="-2.19794899" z3="-0.17742344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13548178" y3="-3.30268828" z3="-1.03028023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49750744" y3="-4.46170961" z3="-0.60501075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00059579" y3="-4.5106235" z3="0.69184571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14484721" y3="-3.44506734" z3="1.5754343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7750513" y3="-2.28923406" z3="1.13221995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49082305" y3="-3.2376402" z3="-2.06194021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36056557" y3="-5.30794992" z3="-1.27871827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26664685" y3="-5.69852951" z3="1.12999845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73888785" y3="-3.52070668" z3="2.58524983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86559883" y3="-1.43679892" z3="1.80684697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48865064" y3="4.02309251" z3="0.08344713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86048697" y3="3.8164647" z3="0.02809016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4096395" y3="3.31340785" z3="-1.14717744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62782903" y3="3.03818411" z3="-2.26652697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25571459" y3="3.24014427" z3="-2.18975073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03434479" y3="4.37423668" z3="1.01432358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50292666" y3="4.02092501" z3="0.8838437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84724171" y3="3.03539244" z3="-1.19874104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09616784" y3="2.65734259" z3="-3.17541616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37201889" y3="2.99813332" z3="-3.04723585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17424101" y3="-5.90356392" z3="2.31943886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77412883" y3="-6.40685596" z3="0.27083195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34093325" y3="2.78883098" z3="-2.2780461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46554302" y3="3.04906821" z3="-0.15080347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59910382" y3="0.15954692" z3="-2.05594544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92715163" y3="1.40771171" z3="-1.90969227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76957175" y3="0.08609032" z3="-2.86072619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24083867" y3="1.19266931" z3="-3.52249874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28205727" y3="-0.87637088" z3="-2.95371746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1383156" y3="1.12380965" z3="-4.14347793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42368901" y3="2.52786384" z3="-2.63359685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5488855" y3="2.42312699" z3="-3.41558636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89469843" y3="3.48097047" z3="-2.57061884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90910912" y3="3.297084" z3="-3.9656504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5812953" y3="3.90138436" z3="-0.25316968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76728827" y3="5.0531284" z3="-0.04550667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93543794" y3="3.94974824" z3="0.18271219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46063116" y3="5.09100483" z3="0.73958106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56225236" y3="3.06227858" z3="0.07782101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50365066" y3="5.10221899" z3="1.06797079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34341844" y3="6.22391208" z3="0.52028533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66254805" y3="6.24902292" z3="0.89893726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7091456" y3="7.10436251" z3="0.65993602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09417065" y3="7.15316733" z3="1.33704193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33861281" y3="-3.96108805" z3="-2.8712812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51967902" y3="-4.99380091" z3="-2.53499757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20996249" y3="-3.64658439" z3="-3.4778001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46059539" y3="-3.96021596" z3="-3.5365206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69080554" y3="-1.61428222" z3="-2.11129064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42747163" y3="-1.14812425" z3="-2.79408022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52591726" y3="-0.9491564" z3="-1.25321515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74086258" y3="-1.66124722" z3="-2.66678203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9061,-.9568,-.6952;6.5801,-1.9542,-1.5782;6.0643,-.9995,-1.4366;4.7622,1.4755,-1.0779;4.278,.3099,-.5092;2.6457,2.7423,-1.1421;3.9981,2.7351,-.8498;2.3829,4.9959,-.3522;1.8044,3.8583,-.864;1.7609,5.8723,-.1446;2.072,1.6197,-1.6651;3.1244,.3597,.2189;1.7033,.3892,-.6265;.6072,.7372,.3119;1.6447,-.8494,-1.4924;1.0952,-2.4734,-1.3128;2.0823,-5.5018,-6.2457;1.8035,-5.0654,-5.2823;1.0743,-3.9201,-2.836;1.765,-3.6848,-5.139;1.5054,-5.89,-4.1945;1.1553,-5.3112,-2.9812;1.4091,-3.0802,-3.9227;2.0042,-3.019,-5.9719;1.5594,-6.9778,-4.2848;.9613,-5.9428,-2.1101;.6607,-3.3695,-1.5961;-.3396,-3.8551,-.8528;-.6772,-4.8599,-1.1201;-.3819,-3.5492,.5945;-.4201,-3.0671,3.3515;-.6851,-4.5835,1.4889;-.1184,-2.269,1.0918;-.134,-2.0303,2.4616;-.6954,-4.3445,2.8619;-.8705,-5.5937,1.1118;.0887,-1.4308,.4266;.088,-1.0213,2.8178;-.8963,-5.1687,3.5525;-.4212,-2.8836,4.4299;1.3587,-1.7445,-3.8974;1.4771,-1.3349,-2.9951;.3324,3.7242,-1.0125;-2.1273,-2.9999,-1.7175;-2.917,-3.1668,-.5757;-3.1137,-2.2829,.3464;-3.8376,-.7131,.5887;-4.6679,-.2299,-1.0117;-2.5317,.4481,1.2075;-5.1117,-1.0479,1.9189;-3.3988,-4.3768,-.3284;-4.1171,-4.6039,.8745;-3.9559,.0939,-1.7868;-5.3508,.6183,-.8237;-5.2672,-1.0636,-1.4211;-1.6351,.5529,.5691;-2.182,.1287,2.2046;-2.9965,1.4459,1.3146;-5.5741,-.0966,2.2402;-5.9217,-1.7091,1.5643;-4.6445,-1.5138,2.8049;-5.0545,-4.0236,.883;-3.5076,-4.3381,1.7522;-4.3452,-5.6783,.8806;4.2733,-2.1979,-.1774;4.1355,-3.3027,-1.0303;3.4975,-4.4617,-.605;3.0006,-4.5106,.6918;3.1448,-3.4451,1.5754;3.7751,-2.2892,1.1322;4.4908,-3.2376,-2.0619;3.3606,-5.3079,-1.2787;2.2666,-5.6985,1.13;2.7389,-3.5207,2.5852;3.8656,-1.4368,1.8068;-.4887,4.0231,.0834;-1.8605,3.8165,.0281;-2.4096,3.3134,-1.1472;-1.6278,3.0382,-2.2665;-.2557,3.2401,-2.1898;-.0343,4.3742,1.0143;-2.5029,4.0209,.8838;-3.8472,3.0354,-1.1987;-2.0962,2.6573,-3.1754;.372,2.9981,-3.0472;2.1742,-5.9036,2.3194;1.7741,-6.4069,.2708;-4.3409,2.7888,-2.278;-4.4655,3.0491,-.1508;6.5991,.1595,-2.0559;5.9272,1.4077,-1.9097;7.7696,.0861,-2.8607;8.2408,1.1927,-3.5225;8.2821,-.8764,-2.9537;9.1383,1.1238,-4.1435;6.4237,2.5279,-2.6336;7.5489,2.4231,-3.4156;5.8947,3.481,-2.5706;7.9091,3.2971,-3.9657;4.5813,3.9014,-.2532;3.7673,5.0531,-.0455;5.9354,3.9497,.1827;6.4606,5.091,.7396;6.5623,3.0623,.0778;7.5037,5.1022,1.068;4.3434,6.2239,.5203;5.6625,6.249,.8989;3.7091,7.1044,.6599;6.0942,7.1532,1.337;-2.3386,-3.9611,-2.8713;-2.5197,-4.9938,-2.535;-3.21,-3.6466,-3.4778;-1.4606,-3.9602,-3.5365;-1.6908,-1.6143,-2.1113;-2.4275,-1.1481,-2.7941;-1.5259,-.9492,-1.2532;-.7409,-1.6612,-2.6668;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662895588459</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003333095275 0.000539777539 0.015834906579 0.005336715908</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056737574 -0.001740895 0.000162294 0.000265518 0.000332444 0.000400491 0.000408484 0.000516589 0.000565017 0.000647544 0.000774397 0.000883911 0.001059893 0.001115243 0.001277216 0.001321296 0.001332301 0.001516218 0.001595527 0.001781521 0.002034332 0.002198818 0.002326034 0.002901442 0.003136346 0.003401808 0.003727612 0.003854853 0.004096686 0.004594565 0.004873120 0.005127659 0.005568041 0.005938480 0.005995747 0.006535607 0.006808657 0.007101020 0.007357303 0.007923138 0.008190948 0.008745892 0.009435702 0.009678711 0.010526559 0.010982389 0.011005729 0.011814550 0.013010935 0.013200343 0.013700711 0.014525995 0.014771430 0.015396945 0.015635073 0.015738384 0.016393276 0.016736385 0.017866698 0.018403193 0.019553234 0.020226596 0.020928817 0.021484907 0.021988960 0.022665094 0.023296527 0.023469658 0.024425220 0.025810972 0.026264834 0.026521800 0.026857896 0.027098349 0.027899308 0.028578946 0.030098704 0.030457585 0.032418535 0.032752441 0.034289997 0.035475817 0.038714288 0.039017007 0.041386573 0.041787482 0.045334766 0.045592568 0.046161369 0.048512635 0.049647427 0.050087917 0.051518953 0.051822226 0.051963302 0.052282768 0.052378874 0.052635411 0.053311668 0.055192787 0.056031176 0.056301464 0.056544082 0.056946273 0.057257879 0.057997417 0.058711174 0.059234638 0.060576723 0.060973553 0.061715481 0.062832139 0.064120528 0.064804629 0.064991428 0.066589971 0.067426658 0.068439320 0.068713847 0.071629135 0.071923007 0.072388686 0.072860779 0.075108269 0.076672708 0.080347962 0.081011737 0.082898692 0.083221569 0.085970830 0.088265344 0.089219032 0.089715152 0.091225214 0.093185804 0.094416953 0.095357161 0.095920716 0.096777095 0.097938705 0.099819113 0.100307527 0.101311229 0.102234760 0.103068854 0.103703917 0.104627116 0.107748161 0.110386258 0.111440788 0.111721205 0.112754529 0.113466184 0.116016372 0.116519940 0.117143266 0.118392974 0.121505159 0.123976508 0.124981978 0.125142188 0.127887803 0.128281381 0.130005801 0.133510945 0.135712175 0.137261603 0.138449470 0.139678243 0.141636629 0.143397177 0.145497029 0.146131801 0.151567932 0.152358970 0.153228406 0.159318657 0.160696460 0.166747924 0.171140248 0.174770078 0.178632456 0.181103890 0.183692016 0.187110794 0.188363041 0.190257716 0.198886283 0.201908201 0.205502062 0.206552616 0.207176301 0.209131201 0.211225084 0.212412724 0.213319605 0.216227752 0.218115984 0.220252820 0.222714847 0.225309525 0.231724885 0.232876165 0.234574574 0.238096580 0.244835232 0.247051205 0.249909354 0.255403095 0.256356806 0.257140703 0.262047963 0.271436472 0.282389703 0.291617611 0.299154979 0.299657014 0.300673678 0.306861156 0.307662361 0.309160628 0.318290198 0.321094637 0.326099741 0.327891618 0.334312052 0.347218719 0.351245225 0.355506365 0.358913654 0.359451773 0.363970746 0.383750414 0.406433434 0.411590594 0.429982741 0.430927964 0.432247540 0.446435347 0.463397971 0.465051394 0.470469564 0.477891881 0.485354271 0.498065544 0.501262322 0.513627642 0.515878489 0.543111963 0.565506758 0.567248062 0.584020173 0.591683402 0.605588457 0.641628181 0.644969239 0.665664043 0.675040417 0.685417619 0.691892914 0.700437111 0.701077946 0.704249004 0.716578517 0.728962543 0.736246012 0.737917280 0.746737761 0.750729504 0.771599663 0.775944623 0.806680688 0.818390483 0.821480895 0.827887008 0.833477605 0.845501663 0.846865724 0.847327023 0.853241932 0.859683124 0.867373293 0.874352343 0.878577789 0.882653717 0.888234950 0.891614076 0.898924151 0.903161454 0.914799820 0.917471975 0.924380301 0.929650496 0.931731565 0.941878378 0.955284870 0.959297120 0.969406216 0.974820625 0.982119464 0.998496486 1.004196843 1.012800133 1.018671035 1.038927118 1.049199303 1.055344716 1.068950804 1.076568777 1.087007904 1.102911071 1.110237698 1.111565373 1.117778329 1.122494561 1.123496194 1.134809550 1.145561956 1.161373562 1.169925433 1.174370055 1.176450006 1.200550932 1.218309513 1.229974020 1.247354285 1.295526462 1.296265341 1.314519122 1.326212630 1.326534762 1.329469146 1.330163427 1.334625741 1.341111540 1.346466308 1.362546215 1.378812858 1.380934274 1.381530493 1.420913181 1.509205258 1.557857011 1.671917935 1.914964486</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">135</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9064382" y3="-0.95700412" z3="-0.69448569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58237771" y3="-1.95402079" z3="-1.57435057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06647271" y3="-0.99936301" z3="-1.43299543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76393874" y3="1.47556738" z3="-1.07502542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27810588" y3="0.30956669" z3="-0.50869622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64750381" y3="2.74205541" z3="-1.14488343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99902772" y3="2.73503148" z3="-0.84860849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3820771" y3="4.99602041" z3="-0.35597887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80532828" y3="3.85807255" z3="-0.86870012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75960267" y3="5.87242675" z3="-0.15082829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07541433" y3="1.61944501" z3="-1.66959393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12281669" y3="0.35864026" z3="0.21670819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7034539" y3="0.38941035" z3="-0.63176879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60563531" y3="0.73845221" z3="0.30426193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64580045" y3="-0.8492316" z3="-1.49790766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09427913" y3="-2.47141787" z3="-1.31730411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06648471" y3="-5.50209981" z3="-6.25230415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79089487" y3="-5.06549524" z3="-5.28806202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06978024" y3="-3.91934765" z3="-2.83979853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75338192" y3="-3.68477013" z3="-5.1450006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49596527" y3="-5.889747" z3="-4.19915968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14984484" y3="-5.31054625" z3="-2.98484439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40186182" y3="-3.07983948" z3="-3.92759537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9900676" y3="-3.01920652" z3="-5.97879701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5493933" y3="-6.97762" z3="-4.28926999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95811494" y3="-5.94188041" z3="-2.11303405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65937521" y3="-3.36852884" z3="-1.5988825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33824868" y3="-3.8551891" z3="-0.85274503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67673209" y3="-4.85982342" z3="-1.1189801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37810885" y3="-3.54748206" z3="0.59429329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41180087" y3="-3.06362132" z3="3.35108127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68067455" y3="-4.580234" z3="1.48930457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11263953" y3="-2.26838944" z3="1.09092674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12587976" y3="-2.02865427" z3="2.46062411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68887812" y3="-4.34030406" z3="2.86208913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86778916" y3="-5.58953165" z3="1.11244622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09122766" y3="-1.43000246" z3="0.42381085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09512816" y3="-1.01802611" z3="2.81538955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89181641" y3="-5.1623641" z3="3.55175283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4116459" y3="-2.8790464" z3="4.4292527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35243986" y3="-1.74414214" z3="-3.90280296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47217457" y3="-1.33362802" z3="-3.00020717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33376462" y3="3.72282056" z3="-1.01939664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12966738" y3="-3.0004986" z3="-1.71492345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91658627" y3="-3.1669787" z3="-0.57155798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11184412" y3="-2.28138753" z3="0.35040265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83891144" y3="-0.71349154" z3="0.59315287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.67616436" y3="-0.23587645" z3="-1.0039632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53259466" y3="0.45155463" z3="1.20471184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10456419" y3="-1.04806644" z3="1.92945076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39857479" y3="-4.37604505" z3="-0.32353823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11266557" y3="-4.60494815" z3="0.88221776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.96665307" y3="0.08422194" z3="-1.78334025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35620842" y3="0.6156901" z3="-0.81802404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.28030293" y3="-1.06867588" z3="-1.40751453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63782771" y3="0.5562406" z3="0.56467182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18134271" y3="0.13398352" z3="2.20225249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99636771" y3="1.44965592" z3="1.30937311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56945034" y3="-0.09958498" z3="2.25310697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91283691" y3="-1.713865" z3="1.57749287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.632113" y3="-1.51004213" z3="2.81472761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05077836" y3="-4.02627668" z3="0.89432148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50047515" y3="-4.33922699" z3="1.75782934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33994136" y3="-5.67917598" z3="0.88851766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27254529" y3="-2.19855502" z3="-0.17897502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13451542" y3="-3.30203743" z3="-1.03352412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49676623" y3="-4.46187287" z3="-0.60978115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00060932" y3="-4.51284031" z3="0.68729826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14469415" y3="-3.44840187" z3="1.57232321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77431292" y3="-2.29163369" z3="1.13049497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48984416" y3="-3.23542375" z3="-2.06509705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35956262" y3="-5.30722827" z3="-1.28469564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26734579" y3="-5.70159345" z3="1.12401237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73889783" y3="-3.52550345" z3="2.58210165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86475216" y3="-1.44001344" z3="1.80616668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48948012" y3="4.02343117" z3="0.0741414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8619574" y3="3.81857708" z3="0.0140261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40775064" y3="3.30954195" z3="-1.15815643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62393948" y3="3.03277998" z3="-2.27573704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2521996" y3="3.23661834" z3="-2.19743669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03853047" y3="4.37864518" z3="1.00326605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50521238" y3="4.02315284" z3="0.87144401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84507926" y3="3.02986278" z3="-1.21166112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08921408" y3="2.64733067" z3="-3.18300965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37566343" y3="2.99665044" z3="-3.05860507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17480175" y3="-5.90767992" z3="2.31291856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77516996" y3="-6.40939022" z3="0.2641793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33567558" y3="2.77469656" z3="-2.2901432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46586381" y3="3.04973248" z3="-0.16500347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6031984" y3="0.16026839" z3="-2.04962393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93110823" y3="1.40841631" z3="-1.90377393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77584509" y3="0.08743431" z3="-2.85126944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24916319" y3="1.19463661" z3="-3.51051804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28841012" y3="-0.87502133" z3="-2.94387431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1483414" y3="1.12626375" z3="-4.12909987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42987157" y3="2.52927694" z3="-2.62503926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55717122" y3="2.42514181" z3="-3.40408778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9009729" y3="3.48250519" z3="-2.56232066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91907155" y3="3.29964659" z3="-3.95216536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58012428" y3="3.90134599" z3="-0.25012768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76556358" y3="5.0534033" z3="-0.04518719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93281527" y3="3.94936339" z3="0.19041168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45649894" y3="5.09057409" z3="0.74897508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55968269" y3="3.06155583" z3="0.0877043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49850113" y3="5.10135629" z3="1.08107116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34003517" y3="6.22428698" z3="0.52248089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65805791" y3="6.24899953" z3="0.90558864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70539245" y3="7.1052667" z3="0.66060748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08842062" y3="7.15317499" z3="1.34508069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34329531" y3="-3.95852959" z3="-2.86916799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52977017" y3="-4.98952502" z3="-2.53518611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21073424" y3="-3.63726007" z3="-3.47324147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46532135" y3="-3.96153321" z3="-3.53468908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69268474" y3="-1.6165168" z3="-2.11152631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42793859" y3="-1.14826409" z3="-2.78647023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53349014" y3="-0.94233022" z3="-1.25065917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74101398" y3="-1.66227437" z3="-2.66578006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9064,-.957,-.6945;6.5824,-1.954,-1.5744;6.0665,-.9994,-1.433;4.7639,1.4756,-1.075;4.2781,.3096,-.5087;2.6475,2.7421,-1.1449;3.999,2.735,-.8486;2.3821,4.996,-.356;1.8053,3.8581,-.8687;1.7596,5.8724,-.1508;2.0754,1.6194,-1.6696;3.1228,.3586,.2167;1.7035,.3894,-.6318;.6056,.7385,.3043;1.6458,-.8492,-1.4979;1.0943,-2.4714,-1.3173;2.0665,-5.5021,-6.2523;1.7909,-5.0655,-5.2881;1.0698,-3.9193,-2.8398;1.7534,-3.6848,-5.145;1.496,-5.8897,-4.1992;1.1498,-5.3105,-2.9848;1.4019,-3.0798,-3.9276;1.9901,-3.0192,-5.9788;1.5494,-6.9776,-4.2893;.9581,-5.9419,-2.113;.6594,-3.3685,-1.5989;-.3382,-3.8552,-.8527;-.6767,-4.8598,-1.119;-.3781,-3.5475,.5943;-.4118,-3.0636,3.3511;-.6807,-4.5802,1.4893;-.1126,-2.2684,1.0909;-.1259,-2.0287,2.4606;-.6889,-4.3403,2.8621;-.8678,-5.5895,1.1124;.0912,-1.43,.4238;.0951,-1.018,2.8154;-.8918,-5.1624,3.5518;-.4116,-2.879,4.4293;1.3524,-1.7441,-3.9028;1.4722,-1.3336,-3.0002;.3338,3.7228,-1.0194;-2.1297,-3.0005,-1.7149;-2.9166,-3.167,-.5716;-3.1118,-2.2814,.3504;-3.8389,-.7135,.5932;-4.6762,-.2359,-1.004;-2.5326,.4516,1.2047;-5.1046,-1.0481,1.9295;-3.3986,-4.376,-.3235;-4.1127,-4.6049,.8822;-3.9667,.0842,-1.7833;-5.3562,.6157,-.818;-5.2803,-1.0687,-1.4075;-1.6378,.5562,.5647;-2.1813,.134,2.2023;-2.9964,1.4497,1.3094;-5.5695,-.0996,2.2531;-5.9128,-1.7139,1.5775;-4.6321,-1.51,2.8147;-5.0508,-4.0263,.8943;-3.5005,-4.3392,1.7578;-4.3399,-5.6792,.8885;4.2725,-2.1986,-.179;4.1345,-3.302,-1.0335;3.4968,-4.4619,-.6098;3.0006,-4.5128,.6873;3.1447,-3.4484,1.5723;3.7743,-2.2916,1.1305;4.4898,-3.2354,-2.0651;3.3596,-5.3072,-1.2847;2.2673,-5.7016,1.124;2.7389,-3.5255,2.5821;3.8648,-1.44,1.8062;-.4895,4.0234,.0741;-1.862,3.8186,.014;-2.4078,3.3095,-1.1582;-1.6239,3.0328,-2.2757;-.2522,3.2366,-2.1974;-.0385,4.3786,1.0033;-2.5052,4.0232,.8714;-3.8451,3.0299,-1.2117;-2.0892,2.6473,-3.183;.3757,2.9967,-3.0586;2.1748,-5.9077,2.3129;1.7752,-6.4094,.2642;-4.3357,2.7747,-2.2901;-4.4659,3.0497,-.165;6.6032,.1603,-2.0496;5.9311,1.4084,-1.9038;7.7758,.0874,-2.8513;8.2492,1.1946,-3.5105;8.2884,-.875,-2.9439;9.1483,1.1263,-4.1291;6.4299,2.5293,-2.625;7.5572,2.4251,-3.4041;5.901,3.4825,-2.5623;7.9191,3.2996,-3.9522;4.5801,3.9013,-.2501;3.7656,5.0534,-.0452;5.9328,3.9494,.1904;6.4565,5.0906,.749;6.5597,3.0616,.0877;7.4985,5.1014,1.0811;4.34,6.2243,.5225;5.6581,6.249,.9056;3.7054,7.1053,.6606;6.0884,7.1532,1.3451;-2.3433,-3.9585,-2.8692;-2.5298,-4.9895,-2.5352;-3.2107,-3.6373,-3.4732;-1.4653,-3.9615,-3.5347;-1.6927,-1.6165,-2.1115;-2.4279,-1.1483,-2.7865;-1.5335,-.9423,-1.2507;-.741,-1.6623,-2.6658;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662893257959</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003132262645 0.000596873954 0.018392102164 0.005337394072</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056743577 -0.002046939 0.000162627 0.000265768 0.000332515 0.000400552 0.000408444 0.000518558 0.000565225 0.000647680 0.000775152 0.000886957 0.001062096 0.001115215 0.001277965 0.001325874 0.001337189 0.001516455 0.001606142 0.001783994 0.002073558 0.002250314 0.002325999 0.002909918 0.003138387 0.003461242 0.003734190 0.003861589 0.004106050 0.004594899 0.004873064 0.005127732 0.005604992 0.005938548 0.005999983 0.006536025 0.006809794 0.007101686 0.007357185 0.007932209 0.008192451 0.008747360 0.009436833 0.009680091 0.010573781 0.010999266 0.011006688 0.011819915 0.013011505 0.013214681 0.013702277 0.014526359 0.014772167 0.015397444 0.015636877 0.015738610 0.016393276 0.016770578 0.017878519 0.018423074 0.019577148 0.020227792 0.020963744 0.021494268 0.022024786 0.022666520 0.023305063 0.023528585 0.024425276 0.025811123 0.026272153 0.026524627 0.026875664 0.027098594 0.027903057 0.028578946 0.030099579 0.030457587 0.032437605 0.032755303 0.034290464 0.035497809 0.038714828 0.039017875 0.041394808 0.041799031 0.045335453 0.045595735 0.046178396 0.048523332 0.049647484 0.050087980 0.051518954 0.051822266 0.051966861 0.052282801 0.052378824 0.052635896 0.053312450 0.055195430 0.056098539 0.056302603 0.056545591 0.056946710 0.057257708 0.058001985 0.058719095 0.059234984 0.060629832 0.061015191 0.061733538 0.062831111 0.064122723 0.064807305 0.064990236 0.066609816 0.067427623 0.068579536 0.068714082 0.071630011 0.071943348 0.072389801 0.072861505 0.075124893 0.076711325 0.080353050 0.081012047 0.082898986 0.083224952 0.085992482 0.088292915 0.089233290 0.089724887 0.091225498 0.093187625 0.094419743 0.095357516 0.095926336 0.096778121 0.097939500 0.099820745 0.100314064 0.101328583 0.102290508 0.103075839 0.103720080 0.104633378 0.107755780 0.110392906 0.111452686 0.111748368 0.112753064 0.113469180 0.116016629 0.116526271 0.117142207 0.118394528 0.121542660 0.124259243 0.124994635 0.126374408 0.128053621 0.128372135 0.130097518 0.133554982 0.135730022 0.137274294 0.138451210 0.139681384 0.141638113 0.143397524 0.145502084 0.146131991 0.151579553 0.152393136 0.153230000 0.159328051 0.160706107 0.166896675 0.171140339 0.174784419 0.178633470 0.181106057 0.183699358 0.187138787 0.188377660 0.190275367 0.198885105 0.201918860 0.205550879 0.206552776 0.207176444 0.209131086 0.211251647 0.212413981 0.213344509 0.216233423 0.218164141 0.220288203 0.222960545 0.225310287 0.231725569 0.232891745 0.234575010 0.238106377 0.244835686 0.247052078 0.249915352 0.255404805 0.256360344 0.257140729 0.262064259 0.271437323 0.282446044 0.291617607 0.299217683 0.299660454 0.300676619 0.306861505 0.307662581 0.309210330 0.318290388 0.321094649 0.326100367 0.327903955 0.334412669 0.347233185 0.351248242 0.355506393 0.358913817 0.359525483 0.363979659 0.383751269 0.406433523 0.411592492 0.430000867 0.431094385 0.432397673 0.446548338 0.463411411 0.465065891 0.470677937 0.477893571 0.485443896 0.498066094 0.501363906 0.513634644 0.515901891 0.543112021 0.565511304 0.567248079 0.584021070 0.591688750 0.605590244 0.641628588 0.644969435 0.665664100 0.675043440 0.685422491 0.691906063 0.700446472 0.701168572 0.704249024 0.716581059 0.729247054 0.736297650 0.737918456 0.746879553 0.750729657 0.771599750 0.775946144 0.806701961 0.818434554 0.821492747 0.827893352 0.833508366 0.845567996 0.847018098 0.847436776 0.853249799 0.859700081 0.867374663 0.874537097 0.879231595 0.883151364 0.888395256 0.891687918 0.899281865 0.903751115 0.914842392 0.917473252 0.924381152 0.930325382 0.931761005 0.942506843 0.955337283 0.959297699 0.969425307 0.974835796 0.982119815 0.998496519 1.004196880 1.012800190 1.018688319 1.038940916 1.049236010 1.055346696 1.068979680 1.076574376 1.087007985 1.102986989 1.110237747 1.111570682 1.117778333 1.122495053 1.123496900 1.134831550 1.145691115 1.161373562 1.169925725 1.174462071 1.176462167 1.200550931 1.218309623 1.230007601 1.247360441 1.295598345 1.296265409 1.314519736 1.326214052 1.326537608 1.329471415 1.330163431 1.334625755 1.341112541 1.346584196 1.362546306 1.378812937 1.380934281 1.381530585 1.421240622 1.509298822 1.557857816 1.671933866 1.915000161</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">136</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90693171" y3="-0.95712371" z3="-0.69333054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58484799" y3="-1.95364815" z3="-1.56984242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06877753" y3="-0.99901389" z3="-1.42899154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76549078" y3="1.4757274" z3="-1.07237618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27823158" y3="0.30933275" z3="-0.50802649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64910604" y3="2.74212658" z3="-1.14748866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99986926" y3="2.7350884" z3="-0.84751157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38155308" y3="4.99619523" z3="-0.35946709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80617781" y3="3.85822364" z3="-0.87402838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75845955" y3="5.87273315" z3="-0.15589348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0787073" y3="1.61936196" z3="-1.6735791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12130454" y3="0.35783724" z3="0.21483558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70386699" y3="0.38931483" z3="-0.63670945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60427856" y3="0.73912709" z3="0.2970207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64738591" y3="-0.84932438" z3="-1.50281282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09315837" y3="-2.47218489" z3="-1.32029136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.05142654" y3="-5.50154362" z3="-6.25870535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77886349" y3="-5.06494957" z3="-5.29361717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06472878" y3="-3.91890379" z3="-2.84327595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.74214483" y3="-3.68421179" z3="-5.15025151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48692919" y3="-5.88922767" z3="-4.20400122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1444467" y3="-5.31008708" z3="-2.98865779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3939441" y3="-3.07930853" z3="-3.93189751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9766863" y3="-3.01874586" z3="-5.98470306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53976537" y3="-6.97708014" z3="-4.29441632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95499593" y3="-5.94140068" z3="-2.11635832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6570038" y3="-3.36844219" z3="-1.60132311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34153307" y3="-3.85252432" z3="-0.85471537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67986514" y3="-4.85771043" z3="-1.11992554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37779307" y3="-3.54597928" z3="0.59273882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40418597" y3="-3.05884444" z3="3.34964911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.674354" y3="-4.57982305" z3="1.49059769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11474072" y3="-2.26399234" z3="1.0867362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12503641" y3="-2.02236779" z3="2.45612638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67886227" y3="-4.3383559" z3="2.86349981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85987874" y3="-5.59132644" z3="1.11616907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08653727" y3="-1.4259058" z3="0.41859136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09584403" y3="-1.01140392" z3="2.80924468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87521136" y3="-5.16190504" z3="3.55685576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40116907" y3="-2.87319909" z3="4.42781287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34440561" y3="-1.74353354" z3="-3.90630331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4696144" y3="-1.3341645" z3="-3.0048761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3350354" y3="3.72273084" z3="-1.0284194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13095201" y3="-2.99726115" z3="-1.7121759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91691647" y3="-3.16573195" z3="-0.56795323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11171806" y3="-2.28195117" z3="0.35492662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8384018" y3="-0.71445525" z3="0.59935532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68225468" y3="-0.23949627" z3="-0.99619622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5326144" y3="0.45450965" z3="1.20423433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09962814" y3="-1.0501142" z3="1.9412508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39666316" y3="-4.37588234" z3="-0.31967478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10885603" y3="-4.60515364" z3="0.88670584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.97598451" y3="0.07557553" z3="-1.78002511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35870054" y3="0.61372645" z3="-0.80878441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.28974834" y3="-1.07281847" z3="-1.39321099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63707631" y3="0.55589068" z3="0.56285649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17955305" y3="0.14461019" z3="2.20313514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99939034" y3="1.45204377" z3="1.30420464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56305393" y3="-0.09973017" z3="2.2639883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90929476" y3="-1.71604762" z3="1.59588497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.62237433" y3="-1.51087696" z3="2.82370221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04617815" y3="-4.02566274" z3="0.90167235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4950275" y3="-4.34054951" z3="1.76131396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33642758" y3="-5.67926" z3="0.89251815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27201672" y3="-2.19915283" z3="-0.18014304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1336004" y3="-3.30105098" z3="-1.03657546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49551556" y3="-4.46127419" z3="-0.6147847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99975999" y3="-4.51436462" z3="0.68238483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14394601" y3="-3.45147684" z3="1.56909585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77359689" y3="-2.29412731" z3="1.12907461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48902925" y3="-3.23271109" z3="-2.06799322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3579692" y3="-5.30540428" z3="-1.29106132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26744875" y3="-5.7042481" z3="1.11776304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73833473" y3="-3.53033121" z3="2.57881546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86413839" y3="-1.44356417" z3="1.80602706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49058756" y3="4.02560077" z3="0.06250737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86180979" y3="3.81634095" z3="0.00348583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40621888" y3="3.30635742" z3="-1.17152623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61949266" y3="3.02710678" z3="-2.28576968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24832598" y3="3.2333064" z3="-2.20601816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04115441" y3="4.3827121" z3="0.99251707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50698081" y3="4.02279022" z3="0.85764434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84194064" y3="3.02185082" z3="-1.22395167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08407911" y3="2.64082736" z3="-3.19469721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38190445" y3="2.99076358" z3="-3.06242091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17683063" y3="-5.91300856" z3="2.30669101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77447514" y3="-6.41048895" z3="0.25715559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33004724" y3="2.75944816" z3="-2.30261031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46528448" y3="3.04798688" z3="-0.17949283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60733068" y3="0.16112348" z3="-2.04309399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93496322" y3="1.40918088" z3="-1.89800029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78229959" y3="0.08891098" z3="-2.84137295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2577784" y3="1.19670986" z3="-3.49807383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29497919" y3="-0.87352793" z3="-2.93336983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15878978" y3="1.12884103" z3="-4.11401523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43604566" y3="2.53065766" z3="-2.61673445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56567781" y3="2.42719041" z3="-3.39244886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90721059" y3="3.48391552" z3="-2.55467786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92937807" y3="3.3022503" z3="-3.93846065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57933287" y3="3.90136069" z3="-0.24731212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76417675" y3="5.05346458" z3="-0.04454765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93092498" y3="3.94921373" z3="0.19686084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4531732" y3="5.09034793" z3="0.75684123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55802983" y3="3.06130782" z3="0.09570234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49446916" y3="5.10096593" z3="1.09147668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33703133" y3="6.22422291" z3="0.52511397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65415259" y3="6.24879506" z3="0.91164967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70192168" y3="7.10510314" z3="0.66173275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08333964" y3="7.15287345" z3="1.35249563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34693911" y3="-3.95608151" z3="-2.86651604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52783158" y3="-4.98945314" z3="-2.52862573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22088128" y3="-3.64119056" z3="-3.47111062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4709572" y3="-3.95615597" z3="-3.53439846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69595156" y3="-1.61160414" z3="-2.10537235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43374225" y3="-1.1459588" z3="-2.78813676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53087171" y3="-0.94674229" z3="-1.24739122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74688644" y3="-1.65787498" z3="-2.66218127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9069,-.9571,-.6933;6.5848,-1.9536,-1.5698;6.0688,-.999,-1.429;4.7655,1.4757,-1.0724;4.2782,.3093,-.508;2.6491,2.7421,-1.1475;3.9999,2.7351,-.8475;2.3816,4.9962,-.3595;1.8062,3.8582,-.874;1.7585,5.8727,-.1559;2.0787,1.6194,-1.6736;3.1213,.3578,.2148;1.7039,.3893,-.6367;.6043,.7391,.297;1.6474,-.8493,-1.5028;1.0932,-2.4722,-1.3203;2.0514,-5.5015,-6.2587;1.7789,-5.0649,-5.2936;1.0647,-3.9189,-2.8433;1.7421,-3.6842,-5.1503;1.4869,-5.8892,-4.204;1.1444,-5.3101,-2.9887;1.3939,-3.0793,-3.9319;1.9767,-3.0187,-5.9847;1.5398,-6.9771,-4.2944;.955,-5.9414,-2.1164;.657,-3.3684,-1.6013;-.3415,-3.8525,-.8547;-.6799,-4.8577,-1.1199;-.3778,-3.546,.5927;-.4042,-3.0588,3.3496;-.6744,-4.5798,1.4906;-.1147,-2.264,1.0867;-.125,-2.0224,2.4561;-.6789,-4.3384,2.8635;-.8599,-5.5913,1.1162;.0865,-1.4259,.4186;.0958,-1.0114,2.8092;-.8752,-5.1619,3.5569;-.4012,-2.8732,4.4278;1.3444,-1.7435,-3.9063;1.4696,-1.3342,-3.0049;.335,3.7227,-1.0284;-2.131,-2.9973,-1.7122;-2.9169,-3.1657,-.568;-3.1117,-2.282,.3549;-3.8384,-.7145,.5994;-4.6823,-.2395,-.9962;-2.5326,.4545,1.2042;-5.0996,-1.0501,1.9413;-3.3967,-4.3759,-.3197;-4.1089,-4.6052,.8867;-3.976,.0756,-1.78;-5.3587,.6137,-.8088;-5.2897,-1.0728,-1.3932;-1.6371,.5559,.5629;-2.1796,.1446,2.2031;-2.9994,1.452,1.3042;-5.5631,-.0997,2.264;-5.9093,-1.716,1.5959;-4.6224,-1.5109,2.8237;-5.0462,-4.0257,.9017;-3.495,-4.3405,1.7613;-4.3364,-5.6793,.8925;4.272,-2.1992,-.1801;4.1336,-3.3011,-1.0366;3.4955,-4.4613,-.6148;2.9998,-4.5144,.6824;3.1439,-3.4515,1.5691;3.7736,-2.2941,1.1291;4.489,-3.2327,-2.068;3.358,-5.3054,-1.2911;2.2674,-5.7042,1.1178;2.7383,-3.5303,2.5788;3.8641,-1.4436,1.806;-.4906,4.0256,.0625;-1.8618,3.8163,.0035;-2.4062,3.3064,-1.1715;-1.6195,3.0271,-2.2858;-.2483,3.2333,-2.206;-.0412,4.3827,.9925;-2.507,4.0228,.8576;-3.8419,3.0219,-1.224;-2.0841,2.6408,-3.1947;.3819,2.9908,-3.0624;2.1768,-5.913,2.3067;1.7745,-6.4105,.2572;-4.33,2.7594,-2.3026;-4.4653,3.048,-.1795;6.6073,.1611,-2.0431;5.935,1.4092,-1.898;7.7823,.0889,-2.8414;8.2578,1.1967,-3.4981;8.295,-.8735,-2.9334;9.1588,1.1288,-4.114;6.436,2.5307,-2.6167;7.5657,2.4272,-3.3924;5.9072,3.4839,-2.5547;7.9294,3.3023,-3.9385;4.5793,3.9014,-.2473;3.7642,5.0535,-.0445;5.9309,3.9492,.1969;6.4532,5.0903,.7568;6.558,3.0613,.0957;7.4945,5.101,1.0915;4.337,6.2242,.5251;5.6542,6.2488,.9116;3.7019,7.1051,.6617;6.0833,7.1529,1.3525;-2.3469,-3.9561,-2.8665;-2.5278,-4.9895,-2.5286;-3.2209,-3.6412,-3.4711;-1.471,-3.9562,-3.5344;-1.696,-1.6116,-2.1054;-2.4337,-1.146,-2.7881;-1.5309,-.9467,-1.2474;-.7469,-1.6579,-2.6622;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662894126561</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003945538968 0.000628839571 0.015752092042 0.005338431890</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056758193 -0.002098510 0.000167671 0.000265900 0.000332864 0.000400551 0.000409245 0.000518424 0.000565688 0.000647752 0.000775352 0.000887095 0.001061958 0.001115198 0.001277923 0.001326425 0.001339468 0.001516640 0.001608167 0.001784128 0.002077385 0.002258540 0.002325988 0.002910663 0.003156176 0.003487474 0.003736544 0.003889830 0.004111039 0.004603992 0.004873638 0.005127659 0.005611523 0.005938416 0.005999938 0.006536482 0.006811000 0.007104713 0.007358888 0.007940267 0.008214691 0.008755803 0.009437425 0.009684980 0.010600900 0.011005095 0.011013192 0.011826179 0.013011316 0.013230150 0.013705694 0.014526994 0.014782700 0.015398065 0.015638936 0.015738699 0.016393424 0.016778803 0.017885934 0.018432982 0.019598558 0.020227714 0.020990614 0.021499177 0.022047623 0.022666510 0.023316023 0.023561871 0.024425341 0.025811443 0.026279510 0.026526703 0.026886371 0.027098703 0.027902989 0.028579004 0.030102300 0.030457803 0.032472056 0.032756880 0.034290830 0.035501681 0.038715972 0.039018058 0.041393992 0.041809064 0.045336025 0.045595741 0.046198381 0.048527057 0.049647487 0.050087923 0.051518985 0.051822388 0.051969274 0.052282800 0.052379209 0.052636935 0.053312589 0.055198152 0.056164521 0.056321057 0.056546428 0.056946808 0.057259318 0.058002260 0.058728555 0.059235043 0.060650897 0.061073151 0.061765958 0.062875329 0.064125220 0.064807225 0.065014788 0.066622005 0.067429666 0.068709211 0.068803233 0.071629943 0.071969452 0.072390856 0.072863347 0.075150626 0.076756934 0.080352813 0.081012234 0.082900787 0.083225413 0.086025941 0.088314094 0.089236635 0.089726561 0.091226632 0.093188806 0.094419605 0.095357549 0.095931995 0.096780853 0.097939491 0.099827295 0.100314334 0.101348019 0.102339019 0.103092250 0.103720203 0.104635011 0.107767536 0.110394192 0.111491445 0.111774349 0.112771423 0.113472343 0.116016942 0.116540604 0.117150480 0.118404629 0.121565372 0.124295778 0.124996991 0.127187620 0.128236374 0.128956238 0.130310599 0.133626934 0.135775475 0.137316423 0.138453919 0.139687692 0.141638529 0.143397783 0.145505883 0.146132220 0.151587469 0.152442241 0.153232867 0.159343926 0.160711010 0.167103190 0.171140828 0.174816098 0.178633718 0.181115746 0.183704201 0.187211423 0.188391525 0.190321555 0.198893721 0.201926895 0.205600234 0.206552928 0.207176826 0.209132459 0.211300232 0.212414044 0.213355911 0.216254187 0.218188584 0.220335132 0.223194187 0.225310306 0.231726620 0.232900083 0.234575938 0.238125551 0.244836564 0.247055109 0.249919647 0.255411184 0.256368636 0.257140870 0.262066311 0.271439266 0.282493136 0.291620452 0.299244975 0.299671964 0.300676478 0.306863080 0.307664188 0.309287559 0.318291332 0.321094849 0.326101476 0.327913678 0.334565101 0.347239357 0.351248147 0.355506524 0.358941993 0.359635118 0.363988164 0.383756852 0.406438823 0.411597871 0.430013788 0.431322856 0.432657113 0.446645017 0.463472356 0.465069929 0.471080470 0.477894012 0.485534118 0.498066302 0.501439897 0.513634683 0.515911052 0.543112431 0.565516096 0.567248099 0.584021515 0.591692767 0.605590779 0.641633667 0.644969639 0.665664233 0.675051681 0.685426381 0.691912214 0.700447529 0.701187493 0.704249043 0.716583964 0.729293704 0.736309926 0.737922698 0.747005778 0.750729702 0.771599761 0.775947106 0.806723077 0.818476234 0.821506588 0.827897077 0.833547540 0.845652469 0.847095606 0.847655835 0.853250016 0.859701980 0.867376346 0.874686862 0.879818704 0.883766532 0.888510494 0.891761286 0.899722160 0.904738002 0.914894945 0.917488272 0.924381576 0.930977537 0.931850174 0.943333934 0.955382891 0.959298738 0.969433524 0.974835914 0.982119941 0.998496843 1.004197129 1.012801061 1.018698718 1.038953320 1.049303155 1.055350394 1.068995640 1.076576990 1.087008446 1.103023365 1.110237761 1.111572463 1.117778343 1.122495626 1.123497884 1.134840994 1.145730700 1.161373744 1.169925734 1.174528381 1.176466248 1.200550935 1.218326050 1.230012652 1.247363133 1.295668228 1.296265487 1.314521022 1.326224325 1.326558916 1.329499810 1.330163404 1.334625765 1.341116716 1.346749603 1.362551529 1.378812999 1.380934294 1.381531900 1.421858779 1.509305974 1.557858054 1.671941696 1.915271297</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">137</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90805159" y3="-0.95735617" z3="-0.69207818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58796123" y3="-1.95339646" z3="-1.56532211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07172644" y3="-0.99878038" z3="-1.42485026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76758068" y3="1.47567678" z3="-1.06940552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27893561" y3="0.30888126" z3="-0.50712306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65124182" y3="2.74143891" z3="-1.14997334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00113363" y3="2.73472856" z3="-0.84615969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38124149" y3="4.99553063" z3="-0.36371541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80725715" y3="3.85732084" z3="-0.87904608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7575265" y3="5.87202112" z3="-0.16203306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08253199" y3="1.61851657" z3="-1.677675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12027864" y3="0.35659785" z3="0.21305463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70477504" y3="0.38863844" z3="-0.64172594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60308041" y3="0.73897867" z3="0.2893383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64993848" y3="-0.8500165" z3="-1.50796939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09310097" y3="-2.47125093" z3="-1.32352107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03599562" y3="-5.50097929" z3="-6.26503674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76635169" y3="-5.06428207" z3="-5.29916349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05960145" y3="-3.91800217" z3="-2.84691496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73055645" y3="-3.68351724" z3="-5.1557714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47731426" y3="-5.88846261" z3="-4.20866971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13831488" y3="-5.30922851" z3="-2.99233866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38627887" y3="-3.07857995" z3="-3.93635596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96292528" y3="-3.01805337" z3="-5.9908226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52961103" y3="-6.97634589" z3="-4.29928323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95087183" y3="-5.94052153" z3="-2.11961402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65482549" y3="-3.36658641" z3="-1.60431435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34033241" y3="-3.85217544" z3="-0.854061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68092448" y3="-4.85648428" z3="-1.11851108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37462624" y3="-3.54274219" z3="0.59279353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39716101" y3="-3.05549506" z3="3.34858614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66959914" y3="-4.5756159" z3="1.49035954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11147715" y3="-2.26168762" z3="1.08619843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11915319" y3="-2.02035639" z3="2.45549875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67193087" y3="-4.33397475" z3="2.86281703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85445271" y3="-5.58672615" z3="1.11613026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08667072" y3="-1.42348347" z3="0.41723437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10063606" y3="-1.00902447" z3="2.80799247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.867415" y3="-5.15664582" z3="3.55483442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39220068" y3="-2.86974163" z3="4.42649505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33760513" y3="-1.74288423" z3="-3.91061302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46496406" y3="-1.33335267" z3="-3.008873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33635163" y3="3.7211747" z3="-1.03608085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13452009" y3="-2.99680118" z3="-1.70988811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.916704" y3="-3.16527914" z3="-0.56357022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10915644" y3="-2.28201443" z3="0.36087525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83860142" y3="-0.71497211" z3="0.60543427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68927447" y3="-0.24471084" z3="-0.98668501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53260896" y3="0.45781578" z3="1.20334434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09282543" y3="-1.05047631" z3="1.95331235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39579343" y3="-4.37574598" z3="-0.3150491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1055022" y3="-4.60634786" z3="0.89241894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98545126" y3="0.06499157" z3="-1.77518818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36318297" y3="0.61174736" z3="-0.80063617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30044884" y3="-1.07855282" z3="-1.37798285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64003248" y3="0.55859486" z3="0.56035336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17841141" y3="0.15112421" z3="2.20329737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99923511" y3="1.45562518" z3="1.29986337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55649851" y3="-0.10220401" z3="2.27891476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90359312" y3="-1.71820818" z3="1.61020476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61179954" y3="-1.51084207" z3="2.83544465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04520409" y3="-4.0294618" z3="0.90660113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49129536" y3="-4.33873318" z3="1.76664819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3298251" y3="-5.6818309" z3="0.89933906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27180882" y3="-2.19964467" z3="-0.18132082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13305123" y3="-3.30002498" z3="-1.03966447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49464161" y3="-4.46083133" z3="-0.61979234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99935353" y3="-4.51608038" z3="0.67749741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14313356" y3="-3.45429505" z3="1.56578603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77268713" y3="-2.29615461" z3="1.12749732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48867457" y3="-3.22994074" z3="-2.07089862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35667326" y3="-5.30378278" z3="-1.29752348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26775362" y3="-5.70693491" z3="1.11126403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73720393" y3="-3.53463657" z3="2.57528127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86278746" y3="-1.44617832" z3="1.80546807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49119217" y3="4.02475362" z3="0.05376254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86278794" y3="3.81626393" z3="-0.00966936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4032406" y3="3.30031639" z3="-1.18114438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6156576" y3="3.02192684" z3="-2.29632138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24455573" y3="3.22928175" z3="-2.21398225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04325904" y3="4.38323201" z3="0.98405615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50987605" y3="4.0238134" z3="0.84312382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84024566" y3="3.01673186" z3="-1.23910077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.076925" y3="2.63123778" z3="-3.20326446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38724923" y3="2.98563434" z3="-3.06965534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1785309" y3="-5.91826102" z3="2.2997494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77358909" y3="-6.41124866" z3="0.2497196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32525534" y3="2.74527098" z3="-2.31569021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46559712" y3="3.04862216" z3="-0.19524492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61206248" y3="0.16191413" z3="-2.03633195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93925959" y3="1.40984561" z3="-1.89198069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78940569" y3="0.09045281" z3="-2.83119446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26689684" y3="1.19889242" z3="-3.48533335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30238684" y3="-0.8718961" z3="-2.92257491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16987502" y3="1.13167679" z3="-4.09847262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4422846" y3="2.53189578" z3="-2.60846921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57432469" y3="2.42919383" z3="-3.38079715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91310658" y3="3.48500688" z3="-2.54748187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93962435" y3="3.30473918" z3="-3.92494804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57877026" y3="3.90113553" z3="-0.24448492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76293975" y3="5.05307011" z3="-0.0449884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92877562" y3="3.94953805" z3="0.20403905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44882063" y3="5.09097658" z3="0.76537717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55642704" y3="3.06191212" z3="0.10522274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48867936" y3="5.10220378" z3="1.10366989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33392097" y3="6.22415682" z3="0.52541937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64940413" y3="6.24924897" z3="0.9165598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69846058" y3="7.10483851" z3="0.65861995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07700371" y3="7.1535774" z3="1.35823525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3514281" y3="-3.95582626" z3="-2.86384197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53302518" y3="-4.98796679" z3="-2.53090078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2231554" y3="-3.63647691" z3="-3.46358493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47654764" y3="-3.95432336" z3="-3.53323433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69999646" y3="-1.6117482" z3="-2.10809914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4370864" y3="-1.14437517" z3="-2.78126966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53918188" y3="-0.93708405" z3="-1.24797127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74988913" y3="-1.65645587" z3="-2.66451865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9081,-.9574,-.6921;6.588,-1.9534,-1.5653;6.0717,-.9988,-1.4249;4.7676,1.4757,-1.0694;4.2789,.3089,-.5071;2.6512,2.7414,-1.15;4.0011,2.7347,-.8462;2.3812,4.9955,-.3637;1.8073,3.8573,-.879;1.7575,5.872,-.162;2.0825,1.6185,-1.6777;3.1203,.3566,.2131;1.7048,.3886,-.6417;.6031,.739,.2893;1.6499,-.85,-1.508;1.0931,-2.4713,-1.3235;2.036,-5.501,-6.265;1.7664,-5.0643,-5.2992;1.0596,-3.918,-2.8469;1.7306,-3.6835,-5.1558;1.4773,-5.8885,-4.2087;1.1383,-5.3092,-2.9923;1.3863,-3.0786,-3.9364;1.9629,-3.0181,-5.9908;1.5296,-6.9763,-4.2993;.9509,-5.9405,-2.1196;.6548,-3.3666,-1.6043;-.3403,-3.8522,-.8541;-.6809,-4.8565,-1.1185;-.3746,-3.5427,.5928;-.3972,-3.0555,3.3486;-.6696,-4.5756,1.4904;-.1115,-2.2617,1.0862;-.1192,-2.0204,2.4555;-.6719,-4.334,2.8628;-.8545,-5.5867,1.1161;.0867,-1.4235,.4172;.1006,-1.009,2.808;-.8674,-5.1566,3.5548;-.3922,-2.8697,4.4265;1.3376,-1.7429,-3.9106;1.465,-1.3334,-3.0089;.3364,3.7212,-1.0361;-2.1345,-2.9968,-1.7099;-2.9167,-3.1653,-.5636;-3.1092,-2.282,.3609;-3.8386,-.715,.6054;-4.6893,-.2447,-.9867;-2.5326,.4578,1.2033;-5.0928,-1.0505,1.9533;-3.3958,-4.3757,-.315;-4.1055,-4.6063,.8924;-3.9855,.065,-1.7752;-5.3632,.6117,-.8006;-5.3004,-1.0786,-1.378;-1.64,.5586,.5604;-2.1784,.1511,2.2033;-2.9992,1.4556,1.2999;-5.5565,-.1022,2.2789;-5.9036,-1.7182,1.6102;-4.6118,-1.5108,2.8354;-5.0452,-4.0295,.9066;-3.4913,-4.3387,1.7666;-4.3298,-5.6818,.8993;4.2718,-2.1996,-.1813;4.1331,-3.3,-1.0397;3.4946,-4.4608,-.6198;2.9994,-4.5161,.6775;3.1431,-3.4543,1.5658;3.7727,-2.2962,1.1275;4.4887,-3.2299,-2.0709;3.3567,-5.3038,-1.2975;2.2678,-5.7069,1.1113;2.7372,-3.5346,2.5753;3.8628,-1.4462,1.8055;-.4912,4.0248,.0538;-1.8628,3.8163,-.0097;-2.4032,3.3003,-1.1811;-1.6157,3.0219,-2.2963;-.2446,3.2293,-2.214;-.0433,4.3832,.9841;-2.5099,4.0238,.8431;-3.8402,3.0167,-1.2391;-2.0769,2.6312,-3.2033;.3872,2.9856,-3.0697;2.1785,-5.9183,2.2997;1.7736,-6.4112,.2497;-4.3253,2.7453,-2.3157;-4.4656,3.0486,-.1952;6.6121,.1619,-2.0363;5.9393,1.4098,-1.892;7.7894,.0905,-2.8312;8.2669,1.1989,-3.4853;8.3024,-.8719,-2.9226;9.1699,1.1317,-4.0985;6.4423,2.5319,-2.6085;7.5743,2.4292,-3.3808;5.9131,3.485,-2.5475;7.9396,3.3047,-3.9249;4.5788,3.9011,-.2445;3.7629,5.0531,-.045;5.9288,3.9495,.204;6.4488,5.091,.7654;6.5564,3.0619,.1052;7.4887,5.1022,1.1037;4.3339,6.2242,.5254;5.6494,6.2492,.9166;3.6985,7.1048,.6586;6.077,7.1536,1.3582;-2.3514,-3.9558,-2.8638;-2.533,-4.988,-2.5309;-3.2232,-3.6365,-3.4636;-1.4765,-3.9543,-3.5332;-1.7,-1.6117,-2.1081;-2.4371,-1.1444,-2.7813;-1.5392,-.9371,-1.248;-.7499,-1.6565,-2.6645;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662897157697</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004309354347 0.000628945132 0.018956768633 0.005338745320</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056783711 -0.002053629 0.000167405 0.000267436 0.000332845 0.000400619 0.000409886 0.000519279 0.000565675 0.000647834 0.000775868 0.000887107 0.001061976 0.001115173 0.001278090 0.001327256 0.001339774 0.001517438 0.001608045 0.001784629 0.002077371 0.002267091 0.002326345 0.002918297 0.003174433 0.003486394 0.003739286 0.003921085 0.004111921 0.004609608 0.004876040 0.005128728 0.005611824 0.005938269 0.006007608 0.006544373 0.006812139 0.007113252 0.007362578 0.007940593 0.008241545 0.008768317 0.009437491 0.009693600 0.010597378 0.011005340 0.011011753 0.011831808 0.013011858 0.013235879 0.013707777 0.014527712 0.014791659 0.015399111 0.015640239 0.015739497 0.016393557 0.016778091 0.017886900 0.018435101 0.019604180 0.020227881 0.021003439 0.021498495 0.022054706 0.022668631 0.023323254 0.023568584 0.024425402 0.025811497 0.026282758 0.026527330 0.026886258 0.027099199 0.027903365 0.028580946 0.030103706 0.030458373 0.032512047 0.032756870 0.034290807 0.035501612 0.038716263 0.039018238 0.041401048 0.041816306 0.045336103 0.045596822 0.046203590 0.048526897 0.049647503 0.050087900 0.051519101 0.051822795 0.051969750 0.052282823 0.052379809 0.052636892 0.053312632 0.055198747 0.056183588 0.056356191 0.056546349 0.056947069 0.057262464 0.058003128 0.058731696 0.059235071 0.060653201 0.061091638 0.061773046 0.062969962 0.064130398 0.064807710 0.065096964 0.066633850 0.067442004 0.068710441 0.069058768 0.071632754 0.071988699 0.072391995 0.072867195 0.075174360 0.076779577 0.080362922 0.081013443 0.082916099 0.083226507 0.086090696 0.088326237 0.089236521 0.089726535 0.091227522 0.093188648 0.094421123 0.095357615 0.095935177 0.096783219 0.097940389 0.099835842 0.100315508 0.101361576 0.102374875 0.103114176 0.103722987 0.104637189 0.107792021 0.110394538 0.111560843 0.111790602 0.112844100 0.113484089 0.116016864 0.116560375 0.117165999 0.118416761 0.121578406 0.124295321 0.124996877 0.127459653 0.128264007 0.129499563 0.130951650 0.133767863 0.135813623 0.137334870 0.138454376 0.139699026 0.141640773 0.143398756 0.145509224 0.146132278 0.151593827 0.152540163 0.153235635 0.159378151 0.160712723 0.167329762 0.171140896 0.174851524 0.178634139 0.181119312 0.183706962 0.187243144 0.188398794 0.190353311 0.198893345 0.201931220 0.205630585 0.206553407 0.207177980 0.209134699 0.211387542 0.212415865 0.213357370 0.216286127 0.218196331 0.220381333 0.223329780 0.225313405 0.231727858 0.232905767 0.234577497 0.238154508 0.244856803 0.247057017 0.249922329 0.255418076 0.256379617 0.257140972 0.262066818 0.271440519 0.282527602 0.291629019 0.299246414 0.299698456 0.300678859 0.306870262 0.307666651 0.309373981 0.318291587 0.321094983 0.326105918 0.327926486 0.334738071 0.347241627 0.351249269 0.355507610 0.358972460 0.359713185 0.363994593 0.383775873 0.406448904 0.411620466 0.430017806 0.431491068 0.432870050 0.446682071 0.463584129 0.465069954 0.471594744 0.477894108 0.485635552 0.498066365 0.501461039 0.513638980 0.515911509 0.543112616 0.565516044 0.567248113 0.584022843 0.591700065 0.605592072 0.641634679 0.644972200 0.665664845 0.675071507 0.685426850 0.691912761 0.700484335 0.701189328 0.704249085 0.716615717 0.729314629 0.736316208 0.737930339 0.747079065 0.750729702 0.771599762 0.775947605 0.806780411 0.818530834 0.821518203 0.827897603 0.833589945 0.845728651 0.847124361 0.847778743 0.853260521 0.859702881 0.867378432 0.874793774 0.880315695 0.884384874 0.888571776 0.891826254 0.900060825 0.905829104 0.915007538 0.917513369 0.924382206 0.931422527 0.932198357 0.944479845 0.955410792 0.959306312 0.969448678 0.974836607 0.982120582 0.998497068 1.004206737 1.012802804 1.018701347 1.038959825 1.049385145 1.055355603 1.068997102 1.076578619 1.087009041 1.103030791 1.110237908 1.111573134 1.117778416 1.122495713 1.123498200 1.134842572 1.145730528 1.161373841 1.169925925 1.174557151 1.176466208 1.200550972 1.218379381 1.230022105 1.247363652 1.295708914 1.296266487 1.314523252 1.326232766 1.326572013 1.329539391 1.330163513 1.334625841 1.341116825 1.346815754 1.362559280 1.378813623 1.380934405 1.381532490 1.422545377 1.509368207 1.557858052 1.671941614 1.915631660</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">138</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90898186" y3="-0.95744724" z3="-0.69110689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5910431" y3="-1.95296978" z3="-1.56069842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07456534" y3="-0.99839972" z3="-1.42079932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76944099" y3="1.47591859" z3="-1.0669066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27945233" y3="0.30865837" z3="-0.50669632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65299715" y3="2.74128067" z3="-1.15260584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00209286" y3="2.73479973" z3="-0.84528208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38024682" y3="4.99551092" z3="-0.36694712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80794003" y3="3.85695302" z3="-0.88346491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75585042" y3="5.8718761" z3="-0.16741598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08604637" y3="1.61832105" z3="-1.68200843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11914521" y3="0.35571125" z3="0.21082138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70549072" y3="0.38855569" z3="-0.64700849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60212209" y3="0.73956992" z3="0.28185392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65192639" y3="-0.84995441" z3="-1.51351231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09158551" y3="-2.4696519" z3="-1.32816521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0205854" y3="-5.5016866" z3="-6.27101062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75405242" y3="-5.06456721" z3="-5.30444713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05488139" y3="-3.91718343" z3="-2.85037271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71917204" y3="-3.68371218" z3="-5.16137383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46806908" y3="-5.88827814" z3="-4.21277086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13295849" y3="-5.30848549" z3="-2.99562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37863493" y3="-3.07821399" z3="-3.94115222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94918613" y3="-3.0186224" z3="-5.99743791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51968746" y3="-6.97623873" z3="-4.30309377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94778521" y3="-5.93935621" z3="-2.12204477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65318498" y3="-3.3659867" z3="-1.60675509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34293391" y3="-3.84893942" z3="-0.85612398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6824612" y3="-4.85457122" z3="-1.11866349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37321746" y3="-3.5409349" z3="0.59129507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38947628" y3="-3.05198711" z3="3.34802938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66651579" y3="-4.57318318" z3="1.49074577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10840959" y3="-2.25969177" z3="1.08378141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11358094" y3="-2.01703844" z3="2.45304606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66605313" y3="-4.33076481" z3="2.86336731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85421548" y3="-5.58348282" z3="1.1170231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08934979" y3="-1.42221724" z3="0.41443825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1075989" y3="-1.00575724" z3="2.8046332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86140796" y3="-5.15260861" z3="3.55682228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38284787" y3="-2.86533519" z3="4.42592421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33023985" y3="-1.74231838" z3="-3.91579692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46090958" y3="-1.33282288" z3="-3.01468481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33760636" y3="3.71974018" z3="-1.04329549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13519189" y3="-2.99460176" z3="-1.7075041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91704225" y3="-3.16460861" z3="-0.56067502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10906529" y3="-2.2810992" z3="0.36354266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83907114" y3="-0.71616657" z3="0.61134736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69700651" y3="-0.24932282" z3="-0.97871766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5334844" y3="0.46055332" z3="1.20216452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08567895" y3="-1.05283855" z3="1.96550114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39514535" y3="-4.37515932" z3="-0.31175933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10206731" y3="-4.60705447" z3="0.89775478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99664784" y3="0.05590599" z3="-1.77190772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36560936" y3="0.61043976" z3="-0.79212485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3146844" y3="-1.08112064" z3="-1.3626652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63991516" y3="0.55955712" z3="0.55746684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17649828" y3="0.15915735" z3="2.20203222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00106711" y3="1.45817732" z3="1.29549247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55071928" y3="-0.10418071" z3="2.29121307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89487116" y3="-1.72372529" z3="1.62916153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59773528" y3="-1.50847486" z3="2.84457388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03943528" y3="-4.02839708" z3="0.91830425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48461879" y3="-4.34431746" z3="1.76982251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32965485" y3="-5.68050384" z3="0.90228404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2716314" y3="-2.20014884" z3="-0.18265349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13281627" y3="-3.2992938" z3="-1.04263335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49421413" y3="-4.4606775" z3="-0.62451733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99903652" y3="-4.51773996" z3="0.67274453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14264662" y3="-3.45722302" z3="1.56247736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77213019" y3="-2.29841292" z3="1.1258347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48878226" y3="-3.22775739" z3="-2.07365485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35611502" y3="-5.30275565" z3="-1.30342167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26768922" y3="-5.70929743" z3="1.10496632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73645998" y3="-3.53892816" z3="2.57176369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86215444" y3="-1.44944148" z3="1.80493968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49276961" y3="4.02573436" z3="0.04278182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86366264" y3="3.81468724" z3="-0.02140648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40296396" y3="3.29827289" z3="-1.19613749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61102586" y3="3.01499129" z3="-2.30477407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24077263" y3="3.22504053" z3="-2.22134357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04837373" y3="4.38814701" z3="0.97223927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5119048" y3="4.02283456" z3="0.83080284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83718526" y3="3.00823789" z3="-1.25068281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07128312" y3="2.62335533" z3="-3.21357782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39229928" y3="2.98209074" z3="-3.07693896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17752647" y3="-5.92116766" z3="2.29303106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77470826" y3="-6.41365606" z3="0.24281517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31929867" y3="2.73002967" z3="-2.32852481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46588085" y3="3.04673617" z3="-0.20998286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61667951" y3="0.16282944" z3="-2.02969493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94343921" y3="1.41064168" z3="-1.88625042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79639802" y3="0.09204866" z3="-2.8210788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27583948" y3="1.20103625" z3="-3.47286313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30971517" y3="-0.87019206" z3="-2.91165375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1806991" y3="1.13435428" z3="-4.08329338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44855243" y3="2.53327396" z3="-2.60034794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58288634" y3="2.43122497" z3="-3.36940554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91919214" y3="3.48636944" z3="-2.54005931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94974516" y3="3.30724006" z3="-3.91174662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57765828" y3="3.90138414" z3="-0.24197601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76109271" y3="5.05343558" z3="-0.044696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92641672" y3="3.94974697" z3="0.21049187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44497702" y3="5.0912686" z3="0.77320472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55424433" y3="3.06191746" z3="0.11350371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48399496" y3="5.10226893" z3="1.11462401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33039061" y3="6.22474945" z3="0.52735541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64501065" y3="6.24974933" z3="0.92211949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69439034" y3="7.10577025" z3="0.65949314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07133278" y3="7.15421221" z3="1.36497657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35506793" y3="-3.95072851" z3="-2.86244861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53685486" y3="-4.98385068" z3="-2.52641297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22907296" y3="-3.63237257" z3="-3.46252507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.481302" y3="-3.95176953" z3="-3.53343603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70220486" y3="-1.60858873" z3="-2.10054879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44124525" y3="-1.14326339" z3="-2.7825595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5369019" y3="-0.94409707" z3="-1.24245724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75293056" y3="-1.65435817" z3="-2.65832824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.909,-.9574,-.6911;6.591,-1.953,-1.5607;6.0746,-.9984,-1.4208;4.7694,1.4759,-1.0669;4.2795,.3087,-.5067;2.653,2.7413,-1.1526;4.0021,2.7348,-.8453;2.3802,4.9955,-.3669;1.8079,3.857,-.8835;1.7559,5.8719,-.1674;2.086,1.6183,-1.682;3.1191,.3557,.2108;1.7055,.3886,-.647;.6021,.7396,.2819;1.6519,-.85,-1.5135;1.0916,-2.4697,-1.3282;2.0206,-5.5017,-6.271;1.7541,-5.0646,-5.3044;1.0549,-3.9172,-2.8504;1.7192,-3.6837,-5.1614;1.4681,-5.8883,-4.2128;1.133,-5.3085,-2.9956;1.3786,-3.0782,-3.9412;1.9492,-3.0186,-5.9974;1.5197,-6.9762,-4.3031;.9478,-5.9394,-2.122;.6532,-3.366,-1.6068;-.3429,-3.8489,-.8561;-.6825,-4.8546,-1.1187;-.3732,-3.5409,.5913;-.3895,-3.052,3.348;-.6665,-4.5732,1.4907;-.1084,-2.2597,1.0838;-.1136,-2.017,2.453;-.6661,-4.3308,2.8634;-.8542,-5.5835,1.117;.0893,-1.4222,.4144;.1076,-1.0058,2.8046;-.8614,-5.1526,3.5568;-.3828,-2.8653,4.4259;1.3302,-1.7423,-3.9158;1.4609,-1.3328,-3.0147;.3376,3.7197,-1.0433;-2.1352,-2.9946,-1.7075;-2.917,-3.1646,-.5607;-3.1091,-2.2811,.3635;-3.8391,-.7162,.6113;-4.697,-.2493,-.9787;-2.5335,.4606,1.2022;-5.0857,-1.0528,1.9655;-3.3951,-4.3752,-.3118;-4.1021,-4.6071,.8978;-3.9966,.0559,-1.7719;-5.3656,.6104,-.7921;-5.3147,-1.0811,-1.3627;-1.6399,.5596,.5575;-2.1765,.1592,2.202;-3.0011,1.4582,1.2955;-5.5507,-.1042,2.2912;-5.8949,-1.7237,1.6292;-4.5977,-1.5085,2.8446;-5.0394,-4.0284,.9183;-3.4846,-4.3443,1.7698;-4.3297,-5.6805,.9023;4.2716,-2.2001,-.1827;4.1328,-3.2993,-1.0426;3.4942,-4.4607,-.6245;2.999,-4.5177,.6727;3.1426,-3.4572,1.5625;3.7721,-2.2984,1.1258;4.4888,-3.2278,-2.0737;3.3561,-5.3028,-1.3034;2.2677,-5.7093,1.105;2.7365,-3.5389,2.5718;3.8622,-1.4494,1.8049;-.4928,4.0257,.0428;-1.8637,3.8147,-.0214;-2.403,3.2983,-1.1961;-1.611,3.015,-2.3048;-.2408,3.225,-2.2213;-.0484,4.3881,.9722;-2.5119,4.0228,.8308;-3.8372,3.0082,-1.2507;-2.0713,2.6234,-3.2136;.3923,2.9821,-3.0769;2.1775,-5.9212,2.293;1.7747,-6.4137,.2428;-4.3193,2.73,-2.3285;-4.4659,3.0467,-.21;6.6167,.1628,-2.0297;5.9434,1.4106,-1.8863;7.7964,.092,-2.8211;8.2758,1.201,-3.4729;8.3097,-.8702,-2.9117;9.1807,1.1344,-4.0833;6.4486,2.5333,-2.6003;7.5829,2.4312,-3.3694;5.9192,3.4864,-2.5401;7.9497,3.3072,-3.9117;4.5777,3.9014,-.242;3.7611,5.0534,-.0447;5.9264,3.9497,.2105;6.445,5.0913,.7732;6.5542,3.0619,.1135;7.484,5.1023,1.1146;4.3304,6.2247,.5274;5.645,6.2497,.9221;3.6944,7.1058,.6595;6.0713,7.1542,1.365;-2.3551,-3.9507,-2.8624;-2.5369,-4.9839,-2.5264;-3.2291,-3.6324,-3.4625;-1.4813,-3.9518,-3.5334;-1.7022,-1.6086,-2.1005;-2.4412,-1.1433,-2.7826;-1.5369,-.9441,-1.2425;-.7529,-1.6544,-2.6583;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662893660960</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005279215884 0.000680892532 0.016593605002 0.005337694008</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056813903 -0.002306505 0.000166935 0.000269387 0.000333870 0.000400639 0.000409879 0.000520366 0.000565750 0.000647837 0.000776629 0.000889187 0.001062015 0.001115344 0.001278746 0.001327351 0.001340123 0.001518106 0.001608826 0.001785221 0.002080859 0.002315514 0.002335055 0.002936078 0.003177710 0.003534520 0.003764699 0.003933548 0.004145182 0.004609503 0.004882009 0.005131338 0.005618742 0.005939271 0.006013977 0.006566149 0.006816426 0.007121118 0.007364019 0.007941106 0.008253535 0.008768305 0.009443347 0.009703714 0.010639734 0.011005521 0.011018836 0.011835374 0.013018614 0.013235553 0.013708301 0.014528304 0.014792061 0.015401041 0.015640500 0.015743155 0.016393590 0.016786101 0.017887684 0.018435166 0.019603433 0.020227999 0.021008001 0.021501463 0.022054974 0.022669767 0.023324499 0.023568006 0.024425501 0.025811626 0.026285715 0.026527324 0.026892058 0.027099764 0.027905280 0.028585075 0.030103514 0.030458931 0.032533387 0.032757814 0.034290942 0.035512355 0.038716437 0.039018500 0.041431085 0.041818423 0.045336225 0.045596673 0.046204347 0.048527984 0.049647505 0.050088361 0.051519281 0.051823160 0.051969727 0.052282835 0.052379900 0.052637844 0.053312901 0.055198724 0.056189119 0.056403736 0.056546704 0.056949036 0.057268664 0.058008385 0.058734460 0.059235087 0.060653306 0.061090921 0.061772761 0.063021350 0.064136114 0.064808881 0.065212209 0.066646873 0.067460351 0.068710422 0.069283537 0.071640128 0.072002158 0.072392708 0.072871773 0.075191111 0.076778015 0.080387711 0.081017719 0.082949612 0.083230928 0.086158668 0.088336114 0.089238979 0.089730938 0.091228051 0.093189601 0.094427989 0.095358010 0.095937822 0.096783721 0.097942251 0.099860094 0.100319303 0.101368690 0.102397337 0.103131277 0.103745419 0.104661275 0.107841005 0.110398309 0.111648593 0.111791268 0.112960684 0.113537346 0.116017934 0.116587917 0.117180070 0.118426918 0.121590443 0.124300206 0.125001699 0.127643785 0.128266957 0.129619105 0.131765278 0.134135549 0.135820037 0.137340488 0.138455390 0.139708725 0.141640692 0.143399952 0.145514839 0.146132308 0.151597180 0.152703079 0.153237500 0.159423966 0.160714103 0.167596911 0.171141462 0.174874053 0.178634845 0.181120288 0.183706816 0.187245240 0.188398316 0.190354628 0.198906456 0.201930886 0.205637661 0.206559377 0.207179756 0.209135398 0.211509332 0.212421975 0.213357585 0.216319886 0.218196360 0.220421645 0.223380101 0.225321618 0.231730574 0.232920133 0.234580106 0.238188358 0.244884608 0.247065317 0.249925603 0.255417858 0.256397982 0.257141098 0.262073910 0.271440429 0.282555015 0.291638646 0.299247127 0.299736435 0.300684431 0.306879526 0.307667220 0.309451109 0.318293890 0.321095011 0.326117992 0.327943881 0.334905492 0.347241946 0.351254781 0.355511417 0.359036810 0.359732721 0.363997385 0.383812581 0.406468611 0.411671777 0.430020587 0.431567020 0.433008450 0.446684637 0.463741760 0.465080773 0.472179206 0.477896217 0.485709810 0.498066362 0.501460744 0.513664575 0.515919764 0.543115268 0.565516884 0.567248140 0.584022973 0.591705688 0.605594122 0.641653804 0.644976542 0.665665147 0.675091283 0.685428584 0.691914225 0.700525709 0.701196076 0.704249113 0.716678878 0.729498396 0.736317427 0.737937996 0.747091334 0.750729938 0.771599798 0.775947829 0.806882406 0.818590932 0.821526857 0.827899614 0.833632040 0.845787896 0.847132135 0.847791315 0.853276567 0.859706867 0.867380267 0.874842677 0.880584029 0.884975794 0.888585026 0.891899193 0.900320691 0.906779077 0.915106993 0.917536348 0.924382619 0.931566186 0.932881643 0.946067758 0.955457302 0.959318873 0.969465803 0.974840050 0.982124648 0.998497078 1.004224089 1.012805310 1.018701431 1.038962145 1.049451537 1.055360780 1.068998405 1.076579146 1.087009220 1.103030963 1.110238212 1.111573238 1.117779988 1.122495722 1.123498292 1.134842774 1.145746458 1.161373849 1.169926407 1.174562276 1.176469227 1.200550981 1.218437048 1.230084027 1.247374059 1.295733287 1.296269910 1.314527042 1.326241736 1.326591708 1.329613192 1.330163528 1.334626116 1.341126079 1.346816390 1.362562033 1.378814519 1.380934404 1.381532534 1.423485793 1.509372716 1.557858304 1.671956390 1.916300287</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">139</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91009966" y3="-0.95747585" z3="-0.68952156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.594415" y3="-1.95244532" z3="-1.55531339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07760819" y3="-0.99794812" z3="-1.41613564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77127836" y3="1.47606021" z3="-1.06427287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27997706" y3="0.30844306" z3="-0.50589764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65481613" y3="2.74095512" z3="-1.15561063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00306155" y3="2.73472886" z3="-0.84447256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37973209" y3="4.99514126" z3="-0.37122416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80891862" y3="3.85650452" z3="-0.88943012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75465338" y3="5.87152584" z3="-0.17297444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08954195" y3="1.61772927" z3="-1.68627704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1179436" y3="0.35486042" z3="0.20890913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70617493" y3="0.38822313" z3="-0.65199578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60098174" y3="0.74018615" z3="0.27438938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6539003" y3="-0.8505376" z3="-1.51823545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09082536" y3="-2.47033032" z3="-1.33034053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00631342" y3="-5.50062928" z3="-6.27683907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74243216" y3="-5.06354724" z3="-5.30957332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04966212" y3="-3.91645752" z3="-2.85386176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70792519" y3="-3.68270858" z3="-5.1663638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45947458" y3="-5.88733548" z3="-4.217248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12754092" y3="-5.30770315" z3="-2.99920681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37053792" y3="-3.07734859" z3="-3.94527901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93583656" y3="-3.01766149" z3="-6.00295708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51084565" y3="-6.97524319" z3="-4.30784089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94467787" y3="-5.93860982" z3="-2.12524968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65029166" y3="-3.36495674" z3="-1.60951103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34309321" y3="-3.84937031" z3="-0.85611394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68517133" y3="-4.85334283" z3="-1.11941093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37236552" y3="-3.53951303" z3="0.59072999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38392487" y3="-3.04779291" z3="3.34630876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66119675" y3="-4.57257534" z3="1.49149847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10993281" y3="-2.25601938" z3="1.08095538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11254491" y3="-2.01236692" z3="2.44992001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65778981" y3="-4.3288882" z3="2.86397076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84486762" y3="-5.58634011" z3="1.12035283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08419621" y3="-1.41808798" z3="0.40985115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10780712" y3="-1.00008625" z3="2.80003829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84652892" y3="-5.15228017" z3="3.55965771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37424439" y3="-2.86076559" z3="4.42415418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32191218" y3="-1.74157382" z3="-3.91919997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45714929" y3="-1.33292842" z3="-3.01876104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33883565" y3="3.71899914" z3="-1.05281638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13864718" y3="-2.99236726" z3="-1.70518238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91721462" y3="-3.16321184" z3="-0.55673507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10712144" y3="-2.28223926" z3="0.3701803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83840497" y3="-0.71641757" z3="0.61794281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7038937" y3="-0.2526353" z3="-0.9680952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53201668" y3="0.46337789" z3="1.20131109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07919431" y3="-1.05373722" z3="1.97828219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39483785" y3="-4.37428691" z3="-0.30893727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09977644" y3="-4.60728689" z3="0.90064856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00711922" y3="0.0472692" z3="-1.76627961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37082557" y3="0.60845407" z3="-0.77997857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32333116" y3="-1.08644592" z3="-1.34607159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64166264" y3="0.56028204" z3="0.55472066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17409496" y3="0.16665038" z3="2.2030873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00129273" y3="1.46077703" z3="1.29072174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54248098" y3="-0.10612263" z3="2.30654229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89134218" y3="-1.72452535" z3="1.64442801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58791831" y3="-1.5114249" z3="2.85595303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03910772" y3="-4.02999539" z3="0.92032338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4817252" y3="-4.34161381" z3="1.77298591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32423279" y3="-5.68308438" z3="0.90654129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27158446" y3="-2.20057327" z3="-0.18345843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1322666" y3="-3.29806417" z3="-1.04533302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49285484" y3="-4.45963783" z3="-0.62929659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99777451" y3="-4.51872869" z3="0.66795181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14166201" y3="-3.459801" z3="1.55939491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77161505" y3="-2.30059779" z3="1.12467052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48868412" y3="-3.22494506" z3="-2.07607898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3543472" y3="-5.30039847" z3="-1.30961156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26713259" y3="-5.71124327" z3="1.09880614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73554355" y3="-3.5431872" z3="2.56856896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86190951" y3="-1.45274459" z3="1.80512133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49325479" y3="4.02518026" z3="0.03321565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86388754" y3="3.81278758" z3="-0.0332155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39883828" y3="3.29028961" z3="-1.2041467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60722897" y3="3.01048251" z3="-2.31696919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23693726" y3="3.2219629" z3="-2.23108161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04870956" y3="4.38709542" z3="0.96456547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51476674" y3="4.02282973" z3="0.81537431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83499779" y3="3.00213396" z3="-1.26589536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06448657" y3="2.61480313" z3="-3.22378595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39863927" y3="2.97570972" z3="-3.08219741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17969034" y3="-5.92661694" z3="2.286976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77235201" y3="-6.41308992" z3="0.23562603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31391449" y3="2.7148211" z3="-2.34085411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4654534" y3="3.04575904" z3="-0.2254776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62140851" y3="0.16374068" z3="-2.02266125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94762072" y3="1.41138333" z3="-1.88038489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80351547" y3="0.09354871" z3="-2.81053275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28487323" y3="1.20298164" z3="-3.46014124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31718165" y3="-0.86859711" z3="-2.90011117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19159931" y3="1.13676453" z3="-4.06785422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4548054" y3="2.5344717" z3="-2.59233806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59148943" y3="2.43302518" z3="-3.35799583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92528066" y3="3.4875086" z3="-2.53309094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95993037" y3="3.309434" z3="-3.89863739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57687527" y3="3.90144013" z3="-0.23967183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75959009" y3="5.05328201" z3="-0.04479684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92449276" y3="3.9501644" z3="0.21620409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44137715" y3="5.09186541" z3="0.77996489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55280916" y3="3.0625078" z3="0.12075112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47966369" y3="5.10319853" z3="1.12364125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32708121" y3="6.22469313" z3="0.52881891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64068397" y3="6.25009695" z3="0.92683584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69057795" y3="7.10538255" z3="0.65892563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06571923" y3="7.15468167" z3="1.37060572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35923876" y3="-3.94984361" z3="-2.85992728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53662784" y3="-4.98350277" z3="-2.52614378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23589698" y3="-3.63308526" z3="-3.45679362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48724961" y3="-3.94544846" z3="-3.53291019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70450622" y3="-1.60728906" z3="-2.10212612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44241559" y3="-1.13948036" z3="-2.77402878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5431869" y3="-0.93342838" z3="-1.2415192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75583627" y3="-1.65095962" z3="-2.66018086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9101,-.9575,-.6895;6.5944,-1.9524,-1.5553;6.0776,-.9979,-1.4161;4.7713,1.4761,-1.0643;4.28,.3084,-.5059;2.6548,2.741,-1.1556;4.0031,2.7347,-.8445;2.3797,4.9951,-.3712;1.8089,3.8565,-.8894;1.7547,5.8715,-.173;2.0895,1.6177,-1.6863;3.1179,.3549,.2089;1.7062,.3882,-.652;.601,.7402,.2744;1.6539,-.8505,-1.5182;1.0908,-2.4703,-1.3303;2.0063,-5.5006,-6.2768;1.7424,-5.0635,-5.3096;1.0497,-3.9165,-2.8539;1.7079,-3.6827,-5.1664;1.4595,-5.8873,-4.2172;1.1275,-5.3077,-2.9992;1.3705,-3.0773,-3.9453;1.9358,-3.0177,-6.003;1.5108,-6.9752,-4.3078;.9447,-5.9386,-2.1252;.6503,-3.365,-1.6095;-.3431,-3.8494,-.8561;-.6852,-4.8533,-1.1194;-.3724,-3.5395,.5907;-.3839,-3.0478,3.3463;-.6612,-4.5726,1.4915;-.1099,-2.256,1.081;-.1125,-2.0124,2.4499;-.6578,-4.3289,2.864;-.8449,-5.5863,1.1204;.0842,-1.4181,.4099;.1078,-1.0001,2.8;-.8465,-5.1523,3.5597;-.3742,-2.8608,4.4242;1.3219,-1.7416,-3.9192;1.4571,-1.3329,-3.0188;.3388,3.719,-1.0528;-2.1386,-2.9924,-1.7052;-2.9172,-3.1632,-.5567;-3.1071,-2.2822,.3702;-3.8384,-.7164,.6179;-4.7039,-.2526,-.9681;-2.532,.4634,1.2013;-5.0792,-1.0537,1.9783;-3.3948,-4.3743,-.3089;-4.0998,-4.6073,.9006;-4.0071,.0473,-1.7663;-5.3708,.6085,-.78;-5.3233,-1.0864,-1.3461;-1.6417,.5603,.5547;-2.1741,.1667,2.2031;-3.0013,1.4608,1.2907;-5.5425,-.1061,2.3065;-5.8913,-1.7245,1.6444;-4.5879,-1.5114,2.856;-5.0391,-4.03,.9203;-3.4817,-4.3416,1.773;-4.3242,-5.6831,.9065;4.2716,-2.2006,-.1835;4.1323,-3.2981,-1.0453;3.4929,-4.4596,-.6293;2.9978,-4.5187,.668;3.1417,-3.4598,1.5594;3.7716,-2.3006,1.1247;4.4887,-3.2249,-2.0761;3.3543,-5.3004,-1.3096;2.2671,-5.7112,1.0988;2.7355,-3.5432,2.5686;3.8619,-1.4527,1.8051;-.4933,4.0252,.0332;-1.8639,3.8128,-.0332;-2.3988,3.2903,-1.2041;-1.6072,3.0105,-2.317;-.2369,3.222,-2.2311;-.0487,4.3871,.9646;-2.5148,4.0228,.8154;-3.835,3.0021,-1.2659;-2.0645,2.6148,-3.2238;.3986,2.9757,-3.0822;2.1797,-5.9266,2.287;1.7724,-6.4131,.2356;-4.3139,2.7148,-2.3409;-4.4655,3.0458,-.2255;6.6214,.1637,-2.0227;5.9476,1.4114,-1.8804;7.8035,.0935,-2.8105;8.2849,1.203,-3.4601;8.3172,-.8686,-2.9001;9.1916,1.1368,-4.0679;6.4548,2.5345,-2.5923;7.5915,2.433,-3.358;5.9253,3.4875,-2.5331;7.9599,3.3094,-3.8986;4.5769,3.9014,-.2397;3.7596,5.0533,-.0448;5.9245,3.9502,.2162;6.4414,5.0919,.78;6.5528,3.0625,.1208;7.4797,5.1032,1.1236;4.3271,6.2247,.5288;5.6407,6.2501,.9268;3.6906,7.1054,.6589;6.0657,7.1547,1.3706;-2.3592,-3.9498,-2.8599;-2.5366,-4.9835,-2.5261;-3.2359,-3.6331,-3.4568;-1.4872,-3.9454,-3.5329;-1.7045,-1.6073,-2.1021;-2.4424,-1.1395,-2.774;-1.5432,-.9334,-1.2415;-.7558,-1.651,-2.6602;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662888328328</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005920916179 0.000699025182 0.019528591039 0.005336760590</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056846058 -0.002415728 0.000174774 0.000269886 0.000334158 0.000400977 0.000410028 0.000521670 0.000568528 0.000649720 0.000777496 0.000889780 0.001062146 0.001115484 0.001279284 0.001328003 0.001340621 0.001518200 0.001608758 0.001785235 0.002082501 0.002323164 0.002370135 0.002941663 0.003180008 0.003603968 0.003809767 0.003932893 0.004195099 0.004610330 0.004884707 0.005133883 0.005625960 0.005941851 0.006013325 0.006590288 0.006823768 0.007122040 0.007364043 0.007947948 0.008252229 0.008778105 0.009451370 0.009704018 0.010729539 0.011006890 0.011043125 0.011839105 0.013028935 0.013237817 0.013708362 0.014528532 0.014795296 0.015402188 0.015640602 0.015748377 0.016394403 0.016804291 0.017895875 0.018436532 0.019611458 0.020228141 0.021010671 0.021511417 0.022055085 0.022669658 0.023324665 0.023572580 0.024425912 0.025811917 0.026285849 0.026528437 0.026913984 0.027100479 0.027907664 0.028588642 0.030108843 0.030459085 0.032543158 0.032761355 0.034291074 0.035530078 0.038718596 0.039018828 0.041496510 0.041818831 0.045336353 0.045598294 0.046208201 0.048534336 0.049647536 0.050089831 0.051519427 0.051823075 0.051970667 0.052282837 0.052379958 0.052639111 0.053313811 0.055199380 0.056188582 0.056436238 0.056548616 0.056952878 0.057278445 0.058016149 0.058739180 0.059235340 0.060653349 0.061095364 0.061783727 0.063021478 0.064138191 0.064810149 0.065303996 0.066656305 0.067476714 0.068710759 0.069402462 0.071645469 0.072006492 0.072393379 0.072877051 0.075205085 0.076789199 0.080419196 0.081026716 0.082997095 0.083241976 0.086261004 0.088341228 0.089245386 0.089737222 0.091228382 0.093192473 0.094439046 0.095359023 0.095939754 0.096783694 0.097942963 0.099891496 0.100324903 0.101370825 0.102409468 0.103135450 0.103783117 0.104705475 0.107900609 0.110407908 0.111733846 0.111797769 0.113044964 0.113679018 0.116024869 0.116618237 0.117193604 0.118429333 0.121601566 0.124310899 0.125017809 0.127824344 0.128267881 0.129637604 0.132320747 0.134809931 0.135819799 0.137482227 0.138461613 0.139714641 0.141641797 0.143401044 0.145520631 0.146132370 0.151601894 0.152902178 0.153241021 0.159487467 0.160715099 0.167878349 0.171145256 0.174882999 0.178636300 0.181144605 0.183707372 0.187359281 0.188400591 0.190362228 0.199005040 0.201931255 0.205637783 0.206576863 0.207182058 0.209135351 0.211632886 0.212435763 0.213364643 0.216362845 0.218197375 0.220455518 0.223397899 0.225333658 0.231734268 0.232945635 0.234583844 0.238225293 0.244946903 0.247074898 0.249940111 0.255423244 0.256421021 0.257141127 0.262090394 0.271443127 0.282579415 0.291643652 0.299249044 0.299784169 0.300689559 0.306892471 0.307667240 0.309516602 0.318301231 0.321095066 0.326139157 0.327979058 0.335052393 0.347242650 0.351261000 0.355518602 0.359093145 0.359732127 0.363998823 0.383846666 0.406487985 0.411724839 0.430023282 0.431611322 0.433061605 0.446691224 0.463925287 0.465142615 0.472777271 0.477898413 0.485778286 0.498066436 0.501487559 0.513697199 0.515955072 0.543118210 0.565521939 0.567248206 0.584023995 0.591732451 0.605599147 0.641763622 0.644992261 0.665665179 0.675131112 0.685439339 0.691923880 0.700543981 0.701196457 0.704249114 0.716780395 0.729930652 0.736327723 0.737946520 0.747092234 0.750731283 0.771599934 0.775948045 0.807027242 0.818645759 0.821536866 0.827905252 0.833686249 0.845823821 0.847134703 0.847802250 0.853289093 0.859708185 0.867381479 0.874871285 0.880762854 0.885561484 0.888586642 0.891988630 0.900519803 0.907427188 0.915229148 0.917543587 0.924383259 0.931609888 0.933582063 0.948245971 0.955563555 0.959342389 0.969491010 0.974845194 0.982129949 0.998497555 1.004259515 1.012809284 1.018701626 1.038962494 1.049507228 1.055367045 1.069007888 1.076583090 1.087009847 1.103045661 1.110238701 1.111573495 1.117785185 1.122495803 1.123498406 1.134847035 1.145793619 1.161374582 1.169927033 1.174565072 1.176479096 1.200551043 1.218476345 1.230238083 1.247395950 1.295744756 1.296278281 1.314534520 1.326245552 1.326597730 1.329685867 1.330163563 1.334626743 1.341159476 1.346890329 1.362561820 1.378815203 1.380934401 1.381533962 1.424505793 1.509399229 1.557858908 1.671986565 1.916914281</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">140</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91144664" y3="-0.95750801" z3="-0.68828551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59782293" y3="-1.9521119" z3="-1.55041726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08079507" y3="-0.99762562" z3="-1.41192275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77351084" y3="1.4761102" z3="-1.061885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2808739" y3="0.3082053" z3="-0.50532568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65707517" y3="2.74031426" z3="-1.15816259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00452002" y3="2.73451148" z3="-0.8437152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37897322" y3="4.99437562" z3="-0.37431459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80986855" y3="3.85539685" z3="-0.89332142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75308881" y3="5.87044862" z3="-0.17784477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09351767" y3="1.61706901" z3="-1.69061584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11716495" y3="0.35397095" z3="0.20680582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70740754" y3="0.38757563" z3="-0.65732098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60007555" y3="0.73964961" z3="0.2665049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65699572" y3="-0.8509514" z3="-1.52391901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09093621" y3="-2.46876232" z3="-1.33425653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99166111" y3="-5.50044229" z3="-6.28273234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73058715" y3="-5.06315536" z3="-5.31476687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04508906" y3="-3.91542618" z3="-2.85711926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69636791" y3="-3.68224838" z3="-5.17184207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45093986" y3="-5.88667292" z3="-4.22132311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12250562" y3="-5.3067262" z3="-3.00238242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36270527" y3="-3.07671303" z3="-3.94983008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92154459" y3="-3.0172747" z3="-6.00929688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5021946" y3="-6.97463952" z3="-4.31180168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9418841" y3="-5.93741387" z3="-2.12776332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64917143" y3="-3.36352638" z3="-1.61189083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34469129" y3="-3.84527962" z3="-0.85731804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68606638" y3="-4.85090183" z3="-1.11793851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36920993" y3="-3.53630945" z3="0.590182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3772485" y3="-3.0465952" z3="3.34609596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65787535" y3="-4.56832137" z3="1.49055795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10468342" y3="-2.25504718" z3="1.08127361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10552601" y3="-2.01210465" z3="2.45028598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65339733" y3="-4.32530185" z3="2.86274651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84556682" y3="-5.57820743" z3="1.11759251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08835466" y3="-1.41706894" z3="0.41093886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1141234" y3="-0.99979553" z3="2.8004528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8466793" y3="-5.14635354" z3="3.55554666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.36782548" y3="-2.85899573" z3="4.42359053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31393918" y3="-1.74085073" z3="-3.92414731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45146399" y3="-1.33176715" z3="-3.02365993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3404017" y3="3.71628602" z3="-1.05878497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1390797" y3="-2.99073887" z3="-1.70239813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91690745" y3="-3.16304997" z3="-0.55313665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10631552" y3="-2.28142589" z3="0.37349418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83833033" y3="-0.71780263" z3="0.62435437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7116993" y3="-0.2586855" z3="-0.95893109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53278059" y3="0.46647865" z3="1.20077503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07100006" y3="-1.05544609" z3="1.99124176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39316367" y3="-4.37463422" z3="-0.30493245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09722962" y3="-4.60892708" z3="0.90541098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01855548" y3="0.0365886" z3="-1.76234531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37345584" y3="0.60663647" z3="-0.77176557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33809432" y3="-1.09022723" z3="-1.32952056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64185072" y3="0.56250323" z3="0.55225805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17160163" y3="0.17441817" z3="2.20190992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0022688" y3="1.46363528" z3="1.28775378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53506529" y3="-0.10810841" z3="2.32109218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88202305" y3="-1.72879355" z3="1.6639566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57308479" y3="-1.50940036" z3="2.86615676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03618367" y3="-4.03194229" z3="0.92681385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47903007" y3="-4.34520233" z3="1.7770975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32231441" y3="-5.68331109" z3="0.9090485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2716895" y3="-2.20079445" z3="-0.18437789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13196038" y3="-3.29691418" z3="-1.0479901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49238163" y3="-4.45914304" z3="-0.63362065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99802733" y3="-4.52030737" z3="0.66381126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14163239" y3="-3.46233447" z3="1.55668241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77131826" y3="-2.30226696" z3="1.12345323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48830044" y3="-3.22208504" z3="-2.07862948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35324055" y3="-5.29879233" z3="-1.31527154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26754008" y3="-5.71346216" z3="1.09296364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73536437" y3="-3.54701553" z3="2.56570241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86124349" y3="-1.45491047" z3="1.80483129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4944473" y3="4.02493518" z3="0.02295006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86487924" y3="3.81182513" z3="-0.0463602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3988226" y3="3.28872073" z3="-1.22036475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60225101" y3="3.00237295" z3="-2.32452625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23279197" y3="3.21599838" z3="-2.23696895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05442218" y3="4.39177993" z3="0.95231497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5165281" y3="4.02212042" z3="0.8030655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83230737" y3="2.99474508" z3="-1.27842028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05815436" y3="2.60535653" z3="-3.23297979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40385294" y3="2.97093849" z3="-3.08969215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17969832" y3="-5.93002321" z3="2.28042253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77257918" y3="-6.41424597" z3="0.22903302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3087692" y3="2.70150657" z3="-2.35478868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46590394" y3="3.04485548" z3="-0.24107526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62628273" y3="0.164489" z3="-2.0161176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95198324" y3="1.41198898" z3="-1.87492354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81072215" y3="0.09497412" z3="-2.80052247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29392631" y3="1.20494761" z3="-3.44782491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32478779" y3="-0.86705168" z3="-2.88922983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20256874" y3="1.13931707" z3="-4.05270646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46094768" y3="2.53554161" z3="-2.58485597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59998493" y3="2.43479051" z3="-3.34707542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93099108" y3="3.48839539" z3="-2.52684436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96990193" y3="3.31161041" z3="-3.8860241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57634493" y3="3.90141729" z3="-0.2374546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75813568" y3="5.05298496" z3="-0.04497518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92258731" y3="3.95077631" z3="0.22216222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43729329" y3="5.09276244" z3="0.78739062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55154727" y3="3.06345291" z3="0.12852284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47434768" y3="5.10472099" z3="1.13424411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32368617" y3="6.22470995" z3="0.52962095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63591814" y3="6.25069994" z3="0.93159065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68652336" y3="7.10513897" z3="0.65741852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05928932" y3="7.15550538" z3="1.37644981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36248307" y3="-3.94622623" z3="-2.85782061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54045911" y3="-4.98004868" z3="-2.52489159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23909374" y3="-3.62735286" z3="-3.45178374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49196937" y3="-3.94299875" z3="-3.53295136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70966815" y3="-1.60277872" z3="-2.09709706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45083953" y3="-1.13816554" z3="-2.77660274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54285808" y3="-0.93659969" z3="-1.23987987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76148929" y3="-1.64757502" z3="-2.65702497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9114,-.9575,-.6883;6.5978,-1.9521,-1.5504;6.0808,-.9976,-1.4119;4.7735,1.4761,-1.0619;4.2809,.3082,-.5053;2.6571,2.7403,-1.1582;4.0045,2.7345,-.8437;2.379,4.9944,-.3743;1.8099,3.8554,-.8933;1.7531,5.8704,-.1778;2.0935,1.6171,-1.6906;3.1172,.354,.2068;1.7074,.3876,-.6573;.6001,.7396,.2665;1.657,-.851,-1.5239;1.0909,-2.4688,-1.3343;1.9917,-5.5004,-6.2827;1.7306,-5.0632,-5.3148;1.0451,-3.9154,-2.8571;1.6964,-3.6822,-5.1718;1.4509,-5.8867,-4.2213;1.1225,-5.3067,-3.0024;1.3627,-3.0767,-3.9498;1.9215,-3.0173,-6.0093;1.5022,-6.9746,-4.3118;.9419,-5.9374,-2.1278;.6492,-3.3635,-1.6119;-.3447,-3.8453,-.8573;-.6861,-4.8509,-1.1179;-.3692,-3.5363,.5902;-.3772,-3.0466,3.3461;-.6579,-4.5683,1.4906;-.1047,-2.255,1.0813;-.1055,-2.0121,2.4503;-.6534,-4.3253,2.8627;-.8456,-5.5782,1.1176;.0884,-1.4171,.4109;.1141,-.9998,2.8005;-.8467,-5.1464,3.5555;-.3678,-2.859,4.4236;1.3139,-1.7409,-3.9241;1.4515,-1.3318,-3.0237;.3404,3.7163,-1.0588;-2.1391,-2.9907,-1.7024;-2.9169,-3.163,-.5531;-3.1063,-2.2814,.3735;-3.8383,-.7178,.6244;-4.7117,-.2587,-.9589;-2.5328,.4665,1.2008;-5.071,-1.0554,1.9912;-3.3932,-4.3746,-.3049;-4.0972,-4.6089,.9054;-4.0186,.0366,-1.7623;-5.3735,.6066,-.7718;-5.3381,-1.0902,-1.3295;-1.6419,.5625,.5523;-2.1716,.1744,2.2019;-3.0023,1.4636,1.2878;-5.5351,-.1081,2.3211;-5.882,-1.7288,1.664;-4.5731,-1.5094,2.8662;-5.0362,-4.0319,.9268;-3.479,-4.3452,1.7771;-4.3223,-5.6833,.909;4.2717,-2.2008,-.1844;4.132,-3.2969,-1.048;3.4924,-4.4591,-.6336;2.998,-4.5203,.6638;3.1416,-3.4623,1.5567;3.7713,-2.3023,1.1235;4.4883,-3.2221,-2.0786;3.3532,-5.2988,-1.3153;2.2675,-5.7135,1.093;2.7354,-3.547,2.5657;3.8612,-1.4549,1.8048;-.4944,4.0249,.023;-1.8649,3.8118,-.0464;-2.3988,3.2887,-1.2204;-1.6023,3.0024,-2.3245;-.2328,3.216,-2.237;-.0544,4.3918,.9523;-2.5165,4.0221,.8031;-3.8323,2.9947,-1.2784;-2.0582,2.6054,-3.233;.4039,2.9709,-3.0897;2.1797,-5.93,2.2804;1.7726,-6.4142,.229;-4.3088,2.7015,-2.3548;-4.4659,3.0449,-.2411;6.6263,.1645,-2.0161;5.952,1.412,-1.8749;7.8107,.095,-2.8005;8.2939,1.2049,-3.4478;8.3248,-.8671,-2.8892;9.2026,1.1393,-4.0527;6.4609,2.5355,-2.5849;7.6,2.4348,-3.3471;5.931,3.4884,-2.5268;7.9699,3.3116,-3.886;4.5763,3.9014,-.2375;3.7581,5.053,-.045;5.9226,3.9508,.2222;6.4373,5.0928,.7874;6.5515,3.0635,.1285;7.4743,5.1047,1.1342;4.3237,6.2247,.5296;5.6359,6.2507,.9316;3.6865,7.1051,.6574;6.0593,7.1555,1.3764;-2.3625,-3.9462,-2.8578;-2.5405,-4.98,-2.5249;-3.2391,-3.6274,-3.4518;-1.492,-3.943,-3.533;-1.7097,-1.6028,-2.0971;-2.4508,-1.1382,-2.7766;-1.5429,-.9366,-1.2399;-.7615,-1.6476,-2.657;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662892114098</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005241479913 0.000636456789 0.017191602417 0.005336755680</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056866830 -0.001952821 0.000173292 0.000269898 0.000334837 0.000400992 0.000410261 0.000522053 0.000569033 0.000649680 0.000778013 0.000890049 0.001062196 0.001116128 0.001279279 0.001327818 0.001341077 0.001518312 0.001608715 0.001787301 0.002082836 0.002323702 0.002372899 0.002942126 0.003193590 0.003626819 0.003823020 0.003947883 0.004201021 0.004611749 0.004884583 0.005133682 0.005626863 0.005943599 0.006021999 0.006604029 0.006825203 0.007122111 0.007365984 0.007954588 0.008261653 0.008816454 0.009452163 0.009706179 0.010785066 0.011010798 0.011067886 0.011843621 0.013033091 0.013241259 0.013711045 0.014528782 0.014809039 0.015402726 0.015641293 0.015748431 0.016395771 0.016815725 0.017906555 0.018444225 0.019616016 0.020229344 0.021011307 0.021517967 0.022055394 0.022671305 0.023327731 0.023575446 0.024426765 0.025812462 0.026286475 0.026532239 0.026934937 0.027101471 0.027910951 0.028588631 0.030126287 0.030459094 0.032544482 0.032766524 0.034291060 0.035541329 0.038723772 0.039019057 0.041595800 0.041843308 0.045336508 0.045608041 0.046219647 0.048546653 0.049647558 0.050091318 0.051519483 0.051824054 0.051973255 0.052282853 0.052380201 0.052638940 0.053315040 0.055201616 0.056190686 0.056452642 0.056551788 0.056955951 0.057294401 0.058020302 0.058752018 0.059237074 0.060654080 0.061107059 0.061794089 0.063039302 0.064138046 0.064811362 0.065353013 0.066658549 0.067486932 0.068712195 0.069427658 0.071646263 0.072010230 0.072393933 0.072880968 0.075214718 0.076818072 0.080441130 0.081035696 0.083032421 0.083255598 0.086322993 0.088344048 0.089254530 0.089744598 0.091228537 0.093194320 0.094449139 0.095360039 0.095942324 0.096783775 0.097942992 0.099926692 0.100328286 0.101371324 0.102415915 0.103135307 0.103827067 0.104738468 0.107937690 0.110419435 0.111754799 0.111865168 0.113072561 0.113867280 0.116026060 0.116645970 0.117204343 0.118429685 0.121618062 0.124314656 0.125033245 0.127942087 0.128276866 0.129644287 0.132571818 0.135462221 0.135838894 0.137817499 0.138471427 0.139718774 0.141644130 0.143403909 0.145524243 0.146132425 0.151606130 0.153043770 0.153251414 0.159553501 0.160715696 0.168082317 0.171151409 0.174883715 0.178637297 0.181187993 0.183709871 0.187568085 0.188406379 0.190390321 0.199188994 0.201932923 0.205638066 0.206596938 0.207183600 0.209135738 0.211724885 0.212454904 0.213381180 0.216394471 0.218205892 0.220486752 0.223411899 0.225345695 0.231739734 0.232978826 0.234588116 0.238257697 0.244973172 0.247098887 0.249986954 0.255452083 0.256451125 0.257141182 0.262110768 0.271450595 0.282599659 0.291645059 0.299264937 0.299821338 0.300691918 0.306905113 0.307669478 0.309562638 0.318308645 0.321095180 0.326159778 0.328030825 0.335152815 0.347242745 0.351268092 0.355527872 0.359136469 0.359757113 0.363998958 0.383872736 0.406510504 0.411751398 0.430029932 0.431619315 0.433090354 0.446729490 0.464060028 0.465315746 0.473190206 0.477898535 0.485794063 0.498067423 0.501551877 0.513737971 0.515988678 0.543122497 0.565523421 0.567248215 0.584026525 0.591737830 0.605600312 0.641944709 0.645009666 0.665667399 0.675169055 0.685456999 0.691952319 0.700550690 0.701212309 0.704249115 0.716860362 0.730412594 0.736393883 0.737952097 0.747093892 0.750733848 0.771600260 0.775948076 0.807117047 0.818669674 0.821546358 0.827909629 0.833730320 0.845838289 0.847135814 0.847849660 0.853295408 0.859708485 0.867381948 0.874877303 0.880795839 0.886063920 0.888586594 0.892086925 0.900660128 0.907831430 0.915297265 0.917543922 0.924383537 0.931625606 0.934033360 0.950332232 0.955780374 0.959395503 0.969509221 0.974864363 0.982136318 0.998498657 1.004278702 1.012811776 1.018702159 1.038962503 1.049543124 1.055373059 1.069016981 1.076598512 1.087013032 1.103089000 1.110238840 1.111573532 1.117793721 1.122495869 1.123498531 1.134860973 1.145858987 1.161378059 1.169927472 1.174613403 1.176495834 1.200551105 1.218482456 1.230459459 1.247406611 1.295748566 1.296286067 1.314542956 1.326246914 1.326604555 1.329763917 1.330163860 1.334627364 1.341188712 1.347012442 1.362562013 1.378815259 1.380934674 1.381536477 1.425521815 1.509429251 1.557859146 1.672000882 1.917627334</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">141</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91279743" y3="-0.95743173" z3="-0.68691493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60136794" y3="-1.95156233" z3="-1.54520283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08400528" y3="-0.99714186" z3="-1.4074767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77535568" y3="1.47643703" z3="-1.0596022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28159585" y3="0.30810458" z3="-0.50485148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65864596" y3="2.74007912" z3="-1.16123315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00530567" y3="2.73463144" z3="-0.84321902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37804411" y3="4.99404377" z3="-0.37844942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81045292" y3="3.85490295" z3="-0.89908022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75152142" y3="5.87001617" z3="-0.18376921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09695879" y3="1.61658584" z3="-1.69506997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1162054" y3="0.35311109" z3="0.2045346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70829624" y3="0.38723448" z3="-0.6626718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.5993216" y3="0.73995339" z3="0.25894073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65937029" y3="-0.85138639" z3="-1.52933109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08869312" y3="-2.4673937" z3="-1.33809323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97738647" y3="-5.49996471" z3="-6.28832808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7190206" y3="-5.06238449" z3="-5.3197652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03988318" y3="-3.91405594" z3="-2.8607492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68471053" y3="-3.68141523" z3="-5.17723947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44295385" y3="-5.88561705" z3="-4.22522344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11771002" y3="-5.30536595" z3="-3.00560037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35424591" y3="-3.07550733" z3="-3.95453821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90729035" y3="-3.01676835" z3="-6.01564162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49436599" y3="-6.97359484" z3="-4.31540904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93980497" y3="-5.93574891" z3="-2.13018831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64602166" y3="-3.36210658" z3="-1.61480833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34587345" y3="-3.84515017" z3="-0.8584066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68863823" y3="-4.84946143" z3="-1.11976936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36992162" y3="-3.53512622" z3="0.58860952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37243437" y3="-3.04319296" z3="3.34469877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65682229" y3="-4.56732041" z3="1.49052638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10490452" y3="-2.25224897" z3="1.07816836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1034251" y3="-2.00826732" z3="2.44719219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64879218" y3="-4.3237429" z3="2.86311574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.842426" y3="-5.58064439" z3="1.11979724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08891773" y3="-1.41532306" z3="0.40719942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11991197" y3="-0.99759918" z3="2.79735071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83437877" y3="-5.14736238" z3="3.56049042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.35884837" y3="-2.85653792" z3="4.4226445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.304987" y3="-1.73960341" z3="-3.92879267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44734955" y3="-1.3312166" z3="-3.02918584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34123246" y3="3.71565914" z3="-1.06847553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14252033" y3="-2.98779426" z3="-1.70087809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91804286" y3="-3.16122821" z3="-0.55057558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10537481" y3="-2.28212365" z3="0.3786983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83821076" y3="-0.71816514" z3="0.63098065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71980599" y3="-0.26170912" z3="-0.94872503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53082842" y3="0.46847873" z3="1.19869295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06308904" y3="-1.05668087" z3="2.00484325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.3946241" y3="-4.37275523" z3="-0.30382752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09546866" y3="-4.60918615" z3="0.90817245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03053854" y3="0.02787262" z3="-1.75745631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37838889" y3="0.6055837" z3="-0.76030464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34954634" y3="-1.09401932" z3="-1.31253486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64334818" y3="0.56302854" z3="0.54759194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16760407" y3="0.17996489" z3="2.20067261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0012025" y3="1.46606438" z3="1.28243497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52613608" y3="-0.10976519" z3="2.33673616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87620014" y3="-1.7308363" z3="1.6811482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56020376" y3="-1.51074866" z3="2.87726094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03336841" y3="-4.03108992" z3="0.93469923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47376803" y3="-4.34824986" z3="1.77845189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32213994" y3="-5.68356511" z3="0.91093977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27199711" y3="-2.20105023" z3="-0.18507554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13161841" y3="-3.2957905" z3="-1.0502955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49141818" y3="-4.45817842" z3="-0.6376013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9971842" y3="-4.52085342" z3="0.65984044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14153248" y3="-3.46447969" z3="1.55422829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77167489" y3="-2.30420821" z3="1.1225871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48815561" y3="-3.21967429" z3="-2.08078697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35201721" y3="-5.29697004" z3="-1.32035139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26690308" y3="-5.71462681" z3="1.08779373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73556761" y3="-3.55056592" z3="2.56324835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86234377" y3="-1.45816597" z3="1.80522751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49592078" y3="4.02558978" z3="0.01234404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86570605" y3="3.80983583" z3="-0.05788789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39535918" y3="3.28105962" z3="-1.22904456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59846382" y3="2.99722269" z3="-2.33670339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22910562" y3="3.21254443" z3="-2.24687046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05600108" y3="4.39238938" z3="0.9439377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52012274" y3="4.02240707" z3="0.78731688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82999543" y3="2.98760101" z3="-1.2933439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05146711" y3="2.59621284" z3="-3.24359108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41027025" y3="2.96380096" z3="-3.09447306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17885485" y3="-5.9320966" z3="2.27515086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77292848" y3="-6.4154125" z3="0.22330949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30270297" y3="2.68566794" z3="-2.36745805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46604888" y3="3.04319569" z3="-0.25722348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63106748" y3="0.16543667" z3="-2.00935898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95617535" y3="1.41278325" z3="-1.86939579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81785494" y3="0.09646889" z3="-2.79025397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30289711" y3="1.2068258" z3="-3.43552087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33232022" y3="-0.86543432" z3="-2.87786384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21340645" y3="1.14162779" z3="-4.03765624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46714455" y3="2.53673028" z3="-2.57728605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60845658" y3="2.43649867" z3="-3.33621013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93694596" y3="3.48953695" z3="-2.52027455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97984265" y3="3.31364061" z3="-3.8736275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57516746" y3="3.9017378" z3="-0.23542161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75617222" y3="5.05315898" z3="-0.04512467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92021201" y3="3.95132715" z3="0.22784435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43336114" y3="5.0934162" z3="0.79434771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5495023" y3="3.06401618" z3="0.13582759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46963742" y3="5.10539448" z3="1.1439719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31992567" y3="6.225066" z3="0.53122811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63130613" y3="6.25124889" z3="0.93651774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68221254" y3="7.10556489" z3="0.65799519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05334244" y3="7.15617713" z3="1.38250369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36647235" y3="-3.94203168" z3="-2.85693332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5404125" y3="-4.97702039" z3="-2.52339943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24686894" y3="-3.62614673" z3="-3.44946466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49755858" y3="-3.93577445" z3="-3.53396567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70961027" y3="-1.60271084" z3="-2.09462718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44861973" y3="-1.13480731" z3="-2.7667689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54831698" y3="-0.93205639" z3="-1.23309096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76085563" y3="-1.64505476" z3="-2.6535124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9128,-.9574,-.6869;6.6014,-1.9516,-1.5452;6.084,-.9971,-1.4075;4.7754,1.4764,-1.0596;4.2816,.3081,-.5049;2.6586,2.7401,-1.1612;4.0053,2.7346,-.8432;2.378,4.994,-.3784;1.8105,3.8549,-.8991;1.7515,5.87,-.1838;2.097,1.6166,-1.6951;3.1162,.3531,.2045;1.7083,.3872,-.6627;.5993,.74,.2589;1.6594,-.8514,-1.5293;1.0887,-2.4674,-1.3381;1.9774,-5.5,-6.2883;1.719,-5.0624,-5.3198;1.0399,-3.9141,-2.8607;1.6847,-3.6814,-5.1772;1.443,-5.8856,-4.2252;1.1177,-5.3054,-3.0056;1.3542,-3.0755,-3.9545;1.9073,-3.0168,-6.0156;1.4944,-6.9736,-4.3154;.9398,-5.9357,-2.1302;.646,-3.3621,-1.6148;-.3459,-3.8452,-.8584;-.6886,-4.8495,-1.1198;-.3699,-3.5351,.5886;-.3724,-3.0432,3.3447;-.6568,-4.5673,1.4905;-.1049,-2.2522,1.0782;-.1034,-2.0083,2.4472;-.6488,-4.3237,2.8631;-.8424,-5.5806,1.1198;.0889,-1.4153,.4072;.1199,-.9976,2.7974;-.8344,-5.1474,3.5605;-.3588,-2.8565,4.4226;1.305,-1.7396,-3.9288;1.4473,-1.3312,-3.0292;.3412,3.7157,-1.0685;-2.1425,-2.9878,-1.7009;-2.918,-3.1612,-.5506;-3.1054,-2.2821,.3787;-3.8382,-.7182,.631;-4.7198,-.2617,-.9487;-2.5308,.4685,1.1987;-5.0631,-1.0567,2.0048;-3.3946,-4.3728,-.3038;-4.0955,-4.6092,.9082;-4.0305,.0279,-1.7575;-5.3784,.6056,-.7603;-5.3495,-1.094,-1.3125;-1.6433,.563,.5476;-2.1676,.18,2.2007;-3.0012,1.4661,1.2824;-5.5261,-.1098,2.3367;-5.8762,-1.7308,1.6811;-4.5602,-1.5107,2.8773;-5.0334,-4.0311,.9347;-3.4738,-4.3482,1.7785;-4.3221,-5.6836,.9109;4.272,-2.2011,-.1851;4.1316,-3.2958,-1.0503;3.4914,-4.4582,-.6376;2.9972,-4.5209,.6598;3.1415,-3.4645,1.5542;3.7717,-2.3042,1.1226;4.4882,-3.2197,-2.0808;3.352,-5.297,-1.3204;2.2669,-5.7146,1.0878;2.7356,-3.5506,2.5632;3.8623,-1.4582,1.8052;-.4959,4.0256,.0123;-1.8657,3.8098,-.0579;-2.3954,3.2811,-1.229;-1.5985,2.9972,-2.3367;-.2291,3.2125,-2.2469;-.056,4.3924,.9439;-2.5201,4.0224,.7873;-3.83,2.9876,-1.2933;-2.0515,2.5962,-3.2436;.4103,2.9638,-3.0945;2.1789,-5.9321,2.2752;1.7729,-6.4154,.2233;-4.3027,2.6857,-2.3675;-4.466,3.0432,-.2572;6.6311,.1654,-2.0094;5.9562,1.4128,-1.8694;7.8179,.0965,-2.7903;8.3029,1.2068,-3.4355;8.3323,-.8654,-2.8779;9.2134,1.1416,-4.0377;6.4671,2.5367,-2.5773;7.6085,2.4365,-3.3362;5.9369,3.4895,-2.5203;7.9798,3.3136,-3.8736;4.5752,3.9017,-.2354;3.7562,5.0532,-.0451;5.9202,3.9513,.2278;6.4334,5.0934,.7943;6.5495,3.064,.1358;7.4696,5.1054,1.144;4.3199,6.2251,.5312;5.6313,6.2512,.9365;3.6822,7.1056,.658;6.0533,7.1562,1.3825;-2.3665,-3.942,-2.8569;-2.5404,-4.977,-2.5234;-3.2469,-3.6261,-3.4495;-1.4976,-3.9358,-3.534;-1.7096,-1.6027,-2.0946;-2.4486,-1.1348,-2.7668;-1.5483,-.9321,-1.2331;-.7609,-1.6451,-2.6535;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662897828830</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004055497133 0.000520421583 0.019634116944 0.005339549411</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056871766 -0.001522649 0.000172810 0.000270154 0.000335572 0.000401081 0.000410253 0.000521928 0.000569646 0.000649736 0.000778103 0.000890008 0.001062196 0.001116475 0.001279725 0.001328943 0.001345743 0.001518437 0.001614588 0.001796922 0.002085294 0.002323715 0.002378318 0.002953925 0.003210103 0.003630674 0.003822944 0.003988422 0.004206123 0.004611489 0.004886265 0.005133928 0.005628786 0.005943738 0.006048963 0.006608026 0.006825162 0.007123948 0.007368784 0.007955103 0.008266172 0.008853785 0.009452161 0.009717038 0.010804629 0.011020851 0.011083191 0.011848757 0.013032354 0.013241846 0.013719654 0.014529103 0.014820627 0.015402864 0.015645970 0.015753737 0.016396126 0.016823233 0.017914107 0.018471779 0.019615628 0.020230414 0.021011472 0.021521371 0.022055446 0.022673354 0.023329349 0.023576012 0.024426991 0.025812670 0.026291382 0.026538810 0.026942974 0.027102345 0.027917448 0.028591409 0.030153333 0.030459279 0.032544568 0.032773620 0.034291590 0.035541362 0.038727918 0.039019318 0.041688501 0.042006953 0.045336700 0.045614974 0.046245783 0.048560765 0.049647565 0.050091577 0.051519499 0.051827831 0.051975810 0.052282861 0.052380269 0.052648718 0.053316228 0.055204807 0.056199155 0.056454868 0.056554794 0.056957201 0.057318295 0.058020111 0.058774703 0.059239761 0.060656368 0.061125953 0.061798076 0.063117707 0.064143289 0.064812493 0.065374727 0.066658421 0.067490664 0.068716685 0.069427790 0.071646462 0.072010459 0.072394580 0.072883148 0.075228195 0.076846918 0.080454802 0.081041466 0.083052890 0.083268512 0.086383562 0.088344314 0.089260388 0.089747587 0.091228655 0.093194845 0.094454404 0.095360656 0.095945367 0.096783780 0.097943423 0.099943368 0.100330563 0.101371309 0.102419624 0.103138995 0.103862154 0.104747926 0.107943385 0.110432821 0.111755251 0.111937241 0.113076870 0.114008189 0.116026055 0.116663948 0.117211951 0.118429951 0.121635059 0.124314971 0.125039116 0.127970830 0.128280533 0.129657600 0.132731588 0.135798088 0.135945890 0.138084574 0.138479214 0.139724478 0.141644101 0.143408312 0.145524858 0.146132685 0.151608575 0.153095048 0.153264335 0.159620378 0.160717221 0.168178210 0.171156284 0.174883754 0.178639891 0.181212944 0.183709672 0.187628623 0.188405973 0.190398070 0.199413570 0.201932732 0.205638157 0.206606238 0.207184283 0.209135711 0.211763193 0.212474226 0.213404094 0.216423843 0.218217357 0.220509239 0.223425506 0.225354831 0.231744089 0.232985848 0.234590774 0.238279783 0.245009074 0.247108792 0.250076444 0.255486818 0.256472561 0.257141773 0.262130329 0.271456686 0.282610177 0.291645203 0.299286879 0.299842231 0.300692058 0.306919734 0.307672804 0.309584590 0.318317529 0.321095396 0.326170683 0.328079922 0.335195003 0.347242969 0.351271238 0.355535694 0.359138922 0.359799727 0.363998994 0.383880757 0.406522648 0.411754319 0.430035409 0.431635333 0.433098438 0.446820488 0.464117976 0.465695199 0.473377948 0.477900693 0.485794528 0.498071351 0.501647479 0.513753087 0.516037155 0.543122397 0.565523453 0.567248450 0.584026415 0.591753626 0.605601403 0.642112847 0.645030693 0.665669994 0.675217617 0.685469068 0.692010171 0.700602719 0.701398607 0.704249135 0.716911000 0.730805089 0.736451937 0.737956290 0.747093810 0.750736302 0.771600614 0.775948078 0.807150771 0.818676221 0.821555677 0.827909587 0.833760092 0.845838896 0.847141433 0.847921977 0.853296397 0.859719335 0.867382005 0.874879913 0.880804254 0.886457256 0.888596539 0.892158594 0.900730574 0.908026466 0.915368869 0.917551910 0.924383816 0.931628827 0.934250817 0.951817325 0.956047315 0.959539169 0.969520365 0.974885889 0.982139570 0.998500259 1.004285604 1.012811907 1.018702622 1.038962686 1.049576933 1.055380509 1.069019345 1.076640004 1.087018336 1.103145692 1.110238840 1.111573540 1.117800413 1.122495977 1.123498775 1.134887222 1.145944223 1.161387562 1.169927677 1.174798656 1.176518783 1.200551179 1.218483966 1.230700622 1.247406928 1.295748755 1.296292428 1.314549927 1.326247017 1.326605379 1.329809732 1.330165270 1.334627380 1.341191748 1.347055232 1.362562723 1.378816584 1.380934923 1.381537211 1.426066546 1.509441575 1.557859148 1.672003390 1.917873058</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">142</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91443222" y3="-0.95748421" z3="-0.68529715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60492081" y3="-1.95119597" z3="-1.5402383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08730276" y3="-0.99681734" z3="-1.40315236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77765813" y3="1.47645744" z3="-1.05712781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28273434" y3="0.30786706" z3="-0.50397811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66096612" y3="2.73931298" z3="-1.16387252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00675809" y3="2.73434458" z3="-0.8424722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37740601" y3="4.99326468" z3="-0.38194885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81163253" y3="3.85378785" z3="-0.90363705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75005826" y3="5.8690872" z3="-0.1886076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10089784" y3="1.61567963" z3="-1.69909362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11570088" y3="0.35233744" z3="0.20283652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70988392" y3="0.38627072" z3="-0.66756169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59858483" y3="0.73905968" z3="0.25131893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66301236" y3="-0.85223277" z3="-1.53437337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0892233" y3="-2.46755328" z3="-1.34020757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.96383788" y3="-5.49801661" z3="-6.294179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70797682" y3="-5.06058262" z3="-5.32492307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03536385" y3="-3.91271413" z3="-2.8640054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67331837" y3="-3.67964438" z3="-5.18234958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4354928" y3="-5.88393744" z3="-4.2296363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.113412" y3="-5.30392965" z3="-3.00906395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.34608578" y3="-3.07406852" z3="-3.95871644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.89313457" y3="-3.01487741" z3="-6.02134132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48724271" y3="-6.97184526" z3="-4.32003377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93801662" y3="-5.93436648" z3="-2.13323425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64455395" y3="-3.36089836" z3="-1.61705445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34688614" y3="-3.84247157" z3="-0.85913799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69017059" y3="-4.84734502" z3="-1.11946385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36666964" y3="-3.53388706" z3="0.58848604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36648865" y3="-3.04290579" z3="3.34439259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65020662" y3="-4.56702102" z3="1.49045921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10335085" y3="-2.25069003" z3="1.07793249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09982927" y3="-2.00746859" z3="2.44693916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64170811" y3="-4.32334111" z3="2.86270265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.83747442" y3="-5.57840899" z3="1.11904419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08324062" y3="-1.41051438" z3="0.40559576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11778048" y3="-0.99252582" z3="2.79518194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8332826" y3="-5.14417895" z3="3.55569613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.35437838" y3="-2.854483" z3="4.42177946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.29580793" y3="-1.73822852" z3="-3.93262621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44235936" y3="-1.33017835" z3="-3.03346546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34304829" y3="3.71282634" z3="-1.07525109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14356949" y3="-2.98580291" z3="-1.69738227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91777996" y3="-3.16119891" z3="-0.54633481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10500581" y3="-2.28227514" z3="0.38329031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8371754" y3="-0.71892207" z3="0.63733338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72743263" y3="-0.26682195" z3="-0.9381213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53038441" y3="0.47203741" z3="1.19745414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05401391" y3="-1.05733759" z3="2.01842006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39269403" y3="-4.37375732" z3="-0.29988398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09392965" y3="-4.61087973" z3="0.9109713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04251728" y3="0.01685357" z3="-1.7525495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38171342" y3="0.60402991" z3="-0.75015565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3624287" y3="-1.09831252" z3="-1.29400348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64267614" y3="0.56468229" z3="0.54404452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16383605" y3="0.1890641" z3="2.19961856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00240649" y3="1.46811412" z3="1.27949937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51637917" y3="-0.11122491" z3="2.3531491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86724281" y3="-1.73303179" z3="1.70078232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54525782" y3="-1.50989781" z3="2.8882893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03425456" y3="-4.03515359" z3="0.93422273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47418344" y3="-4.34646085" z3="1.78242261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.316585" y3="-5.68700479" z3="0.91421682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27247363" y3="-2.20127401" z3="-0.18540304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13099847" y3="-3.29447224" z3="-1.05231732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49004365" y3="-4.4570002" z3="-0.64117125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99674384" y3="-4.52158817" z3="0.65654185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14171553" y3="-3.46643556" z3="1.55238127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77213501" y3="-2.30573082" z3="1.12211022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48742728" y3="-3.21692806" z3="-2.08272722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34951808" y3="-5.29442004" z3="-1.32519401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26718811" y3="-5.71616131" z3="1.08349866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73614864" y3="-3.55387594" z3="2.56144681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8632661" y3="-1.46041363" z3="1.80580101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49666721" y3="4.02505705" z3="0.00217367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86634801" y3="3.8086983" z3="-0.07154681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39400579" y3="3.27709357" z3="-1.243713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.5931087" y3="2.98815027" z3="-2.34487118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22446844" y3="3.20560123" z3="-2.25318731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06065844" y3="4.3968719" z3="0.93175189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52201425" y3="4.0221352" z3="0.77367571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82693596" y3="2.97928814" z3="-1.30638794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04435133" y3="2.58478953" z3="-3.2525212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4165169" y3="2.95629897" z3="-3.10109126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18329456" y3="-5.93776135" z3="2.27097429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76959657" y3="-6.41334945" z3="0.21814025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2972737" y3="2.67113928" z3="-2.38080594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46562086" y3="3.04038412" z3="-0.27244998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63583645" y3="0.16614886" z3="-2.00297306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96047327" y3="1.41335758" z3="-1.86404448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82469381" y3="0.09773859" z3="-2.78076665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31135229" y3="1.20851579" z3="-3.42408349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3395091" y3="-0.86406922" z3="-2.86751258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22349458" y3="1.14375114" z3="-4.02380085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47312993" y3="2.53772998" z3="-2.57004558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61648958" y3="2.43805905" z3="-3.32595081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94269871" y3="3.49045431" z3="-2.51399418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98921301" y3="3.31555379" z3="-3.86186304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57461869" y3="3.90165723" z3="-0.23328706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75471793" y3="5.05277371" z3="-0.04520778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91848163" y3="3.95177845" z3="0.23326908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42967547" y3="5.0940691" z3="0.80102785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54839796" y3="3.06474131" z3="0.14260529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46510103" y3="5.1065381" z3="1.1530336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31655679" y3="6.22485986" z3="0.53247713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62678128" y3="6.25157262" z3="0.941188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67824838" y3="7.10495083" z3="0.6569725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04738343" y3="7.15664535" z3="1.38815908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37011657" y3="-3.93882967" z3="-2.85451041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54722776" y3="-4.97290614" z3="-2.52463456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24782769" y3="-3.61805364" z3="-3.44482958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50170096" y3="-3.93350431" z3="-3.53218288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7151836" y3="-1.59676072" z3="-2.09173159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45704877" y3="-1.1312127" z3="-2.76842151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54791528" y3="-0.92981629" z3="-1.23404547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76871609" y3="-1.64035573" z3="-2.65359269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9144,-.9575,-.6853;6.6049,-1.9512,-1.5402;6.0873,-.9968,-1.4032;4.7777,1.4765,-1.0571;4.2827,.3079,-.504;2.661,2.7393,-1.1639;4.0068,2.7343,-.8425;2.3774,4.9933,-.3819;1.8116,3.8538,-.9036;1.7501,5.8691,-.1886;2.1009,1.6157,-1.6991;3.1157,.3523,.2028;1.7099,.3863,-.6676;.5986,.7391,.2513;1.663,-.8522,-1.5344;1.0892,-2.4676,-1.3402;1.9638,-5.498,-6.2942;1.708,-5.0606,-5.3249;1.0354,-3.9127,-2.864;1.6733,-3.6796,-5.1823;1.4355,-5.8839,-4.2296;1.1134,-5.3039,-3.0091;1.3461,-3.0741,-3.9587;1.8931,-3.0149,-6.0213;1.4872,-6.9718,-4.32;.938,-5.9344,-2.1332;.6446,-3.3609,-1.6171;-.3469,-3.8425,-.8591;-.6902,-4.8473,-1.1195;-.3667,-3.5339,.5885;-.3665,-3.0429,3.3444;-.6502,-4.567,1.4905;-.1034,-2.2507,1.0779;-.0998,-2.0075,2.4469;-.6417,-4.3233,2.8627;-.8375,-5.5784,1.119;.0832,-1.4105,.4056;.1178,-.9925,2.7952;-.8333,-5.1442,3.5557;-.3544,-2.8545,4.4218;1.2958,-1.7382,-3.9326;1.4424,-1.3302,-3.0335;.343,3.7128,-1.0753;-2.1436,-2.9858,-1.6974;-2.9178,-3.1612,-.5463;-3.105,-2.2823,.3833;-3.8372,-.7189,.6373;-4.7274,-.2668,-.9381;-2.5304,.472,1.1975;-5.054,-1.0573,2.0184;-3.3927,-4.3738,-.2999;-4.0939,-4.6109,.911;-4.0425,.0169,-1.7525;-5.3817,.604,-.7502;-5.3624,-1.0983,-1.294;-1.6427,.5647,.544;-2.1638,.1891,2.1996;-3.0024,1.4681,1.2795;-5.5164,-.1112,2.3531;-5.8672,-1.733,1.7008;-4.5453,-1.5099,2.8883;-5.0343,-4.0352,.9342;-3.4742,-4.3465,1.7824;-4.3166,-5.687,.9142;4.2725,-2.2013,-.1854;4.131,-3.2945,-1.0523;3.49,-4.457,-.6412;2.9967,-4.5216,.6565;3.1417,-3.4664,1.5524;3.7721,-2.3057,1.1221;4.4874,-3.2169,-2.0827;3.3495,-5.2944,-1.3252;2.2672,-5.7162,1.0835;2.7361,-3.5539,2.5614;3.8633,-1.4604,1.8058;-.4967,4.0251,.0022;-1.8663,3.8087,-.0715;-2.394,3.2771,-1.2437;-1.5931,2.9882,-2.3449;-.2245,3.2056,-2.2532;-.0607,4.3969,.9318;-2.522,4.0221,.7737;-3.8269,2.9793,-1.3064;-2.0444,2.5848,-3.2525;.4165,2.9563,-3.1011;2.1833,-5.9378,2.271;1.7696,-6.4133,.2181;-4.2973,2.6711,-2.3808;-4.4656,3.0404,-.2724;6.6358,.1661,-2.003;5.9605,1.4134,-1.864;7.8247,.0977,-2.7808;8.3114,1.2085,-3.4241;8.3395,-.8641,-2.8675;9.2235,1.1438,-4.0238;6.4731,2.5377,-2.57;7.6165,2.4381,-3.326;5.9427,3.4905,-2.514;7.9892,3.3156,-3.8619;4.5746,3.9017,-.2333;3.7547,5.0528,-.0452;5.9185,3.9518,.2333;6.4297,5.0941,.801;6.5484,3.0647,.1426;7.4651,5.1065,1.153;4.3166,6.2249,.5325;5.6268,6.2516,.9412;3.6782,7.105,.657;6.0474,7.1566,1.3882;-2.3701,-3.9388,-2.8545;-2.5472,-4.9729,-2.5246;-3.2478,-3.6181,-3.4448;-1.5017,-3.9335,-3.5322;-1.7152,-1.5968,-2.0917;-2.457,-1.1312,-2.7684;-1.5479,-.9298,-1.234;-.7687,-1.6404,-2.6536;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662893751552</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002936633323 0.000510791421 0.019537336387 0.005337474473</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056871715 -0.001737094 0.000179261 0.000273245 0.000336105 0.000402283 0.000412560 0.000523820 0.000573982 0.000651167 0.000779539 0.000891695 0.001062239 0.001116666 0.001280592 0.001330479 0.001355353 0.001518730 0.001659658 0.001825995 0.002092501 0.002324501 0.002411486 0.002990222 0.003214627 0.003641846 0.003855086 0.004026004 0.004272283 0.004611416 0.004891362 0.005140480 0.005635216 0.005944458 0.006072666 0.006608077 0.006828862 0.007129518 0.007374647 0.007960690 0.008265763 0.008860927 0.009452153 0.009729747 0.010806956 0.011027648 0.011088126 0.011858652 0.013048734 0.013242056 0.013741237 0.014529336 0.014822757 0.015403310 0.015653801 0.015816082 0.016396131 0.016828039 0.017919104 0.018551747 0.019623799 0.020230497 0.021011429 0.021522764 0.022056627 0.022673463 0.023329553 0.023576166 0.024427117 0.025812642 0.026300311 0.026544811 0.026945712 0.027102259 0.027929798 0.028607150 0.030180210 0.030460280 0.032545617 0.032787446 0.034292514 0.035542530 0.038731324 0.039022477 0.041724090 0.042493627 0.045337226 0.045634084 0.046287776 0.048578144 0.049647604 0.050091689 0.051519504 0.051832510 0.051978231 0.052282859 0.052380286 0.052685764 0.053317311 0.055215623 0.056208964 0.056455331 0.056558025 0.056957511 0.057356199 0.058023331 0.058806050 0.059243806 0.060660691 0.061169949 0.061803389 0.063233646 0.064153106 0.064813231 0.065392664 0.066660943 0.067491892 0.068728833 0.069427937 0.071650266 0.072010699 0.072394929 0.072883797 0.075239501 0.076873103 0.080459315 0.081046914 0.083059771 0.083272939 0.086404883 0.088344563 0.089263803 0.089750137 0.091228837 0.093194807 0.094455674 0.095360714 0.095951670 0.096783851 0.097945646 0.099951246 0.100331561 0.101371433 0.102422750 0.103142658 0.103887552 0.104747292 0.107943045 0.110446768 0.111755258 0.111991305 0.113077256 0.114087253 0.116034799 0.116674926 0.117211720 0.118430153 0.121652722 0.124318717 0.125038571 0.127968750 0.128282262 0.129685192 0.132869397 0.135843071 0.136287617 0.138207365 0.138481530 0.139736876 0.141644794 0.143414150 0.145524848 0.146133011 0.151610290 0.153103715 0.153269216 0.159706229 0.160720646 0.168199011 0.171159939 0.174884176 0.178646030 0.181217692 0.183713504 0.187627266 0.188412649 0.190403976 0.199653055 0.201933146 0.205640633 0.206606353 0.207184455 0.209141279 0.211776346 0.212487165 0.213420535 0.216437529 0.218228643 0.220523400 0.223426923 0.225360651 0.231747405 0.232986361 0.234591531 0.238292131 0.245013731 0.247117055 0.250145515 0.255510289 0.256486868 0.257143394 0.262144406 0.271459444 0.282614945 0.291645559 0.299310182 0.299848831 0.300692133 0.306932120 0.307675588 0.309592072 0.318318030 0.321095637 0.326173253 0.328092330 0.335207312 0.347247303 0.351271923 0.355542272 0.359143357 0.359851460 0.363999964 0.383883289 0.406533138 0.411754372 0.430043968 0.431635089 0.433101084 0.447010466 0.464128693 0.466352579 0.473419264 0.477910269 0.485824988 0.498083527 0.501774432 0.513758576 0.516078785 0.543124704 0.565532974 0.567250578 0.584039774 0.591753903 0.605601507 0.642238151 0.645036312 0.665670378 0.675243259 0.685472571 0.692088724 0.700694371 0.701811235 0.704249450 0.716920620 0.730962269 0.736514690 0.737958141 0.747096218 0.750737162 0.771600914 0.775948110 0.807161351 0.818683510 0.821562290 0.827910329 0.833768111 0.845841320 0.847154863 0.848023114 0.853296544 0.859745191 0.867382005 0.874879981 0.880811468 0.886766116 0.888677204 0.892205051 0.900759451 0.908109413 0.915388203 0.917568440 0.924384043 0.931628862 0.934323550 0.952575855 0.956287942 0.959826426 0.969521643 0.974961191 0.982143635 0.998500916 1.004285573 1.012815033 1.018703787 1.038962884 1.049603861 1.055387553 1.069019436 1.076690514 1.087020707 1.103188539 1.110238890 1.111573725 1.117807408 1.122496057 1.123498832 1.134919966 1.146056277 1.161405711 1.169927709 1.175208291 1.176554087 1.200552181 1.218519815 1.230896123 1.247459195 1.295755818 1.296294162 1.314555517 1.326247287 1.326609364 1.329835396 1.330172835 1.334627692 1.341205217 1.347058429 1.362573903 1.378821129 1.380936571 1.381537264 1.426272561 1.509500333 1.557859461 1.672080889 1.918028981</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">143</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91612135" y3="-0.95706701" z3="-0.68401939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60829244" y3="-1.95048954" z3="-1.53586127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09046481" y3="-0.99612855" z3="-1.39940628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77973856" y3="1.47691335" z3="-1.05523993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28384214" y3="0.3080565" z3="-0.50354957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66284524" y3="2.73898661" z3="-1.16684916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00787974" y3="2.73452024" z3="-0.84222995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37634914" y3="4.99261173" z3="-0.38519236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8121774" y3="3.85292531" z3="-0.90837402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74823179" y3="5.86813472" z3="-0.19349842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10481384" y3="1.61508297" z3="-1.70364897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11525886" y3="0.3518606" z3="0.20067351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71131828" y3="0.38591327" z3="-0.67288936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59819349" y3="0.73899582" z3="0.24356894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66661888" y3="-0.85269652" z3="-1.53973099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08809811" y3="-2.46476169" z3="-1.34465509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9499886" y3="-5.49737416" z3="-6.29985945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.69697075" y3="-5.05965722" z3="-5.32992345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03114148" y3="-3.9110028" z3="-2.86737841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.66219034" y3="-3.67862491" z3="-5.18779704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.42825437" y3="-5.88269366" z3="-4.23338761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.10947052" y3="-5.302286" z3="-3.01203717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33848459" y3="-3.07270933" z3="-3.9633432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.87905699" y3="-3.01405993" z3="-6.02778943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48025071" y3="-6.97066213" z3="-4.32349945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93666373" y3="-5.93242444" z3="-2.13540968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64272823" y3="-3.35868892" z3="-1.61983255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34805818" y3="-3.83996147" z3="-0.86081008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69168678" y3="-4.84472199" z3="-1.12051966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3675212" y3="-3.53052999" z3="0.58656999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36656116" y3="-3.04175769" z3="3.34249691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65520971" y3="-4.56215164" z3="1.48711773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09911405" y3="-2.25026031" z3="1.07757882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09616241" y3="-2.00760325" z3="2.44661095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64550146" y3="-4.32015043" z3="2.85952693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8425461" y3="-5.57374832" z3="1.1149775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09819724" y3="-1.41505755" z3="0.40939037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13066961" y3="-1.00010555" z3="2.7988563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.82959235" y3="-5.14464445" z3="3.55650636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3511058" y3="-2.85639174" z3="4.42044147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.28781077" y3="-1.73676915" z3="-3.93747892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43802473" y3="-1.32881436" z3="-3.03865011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34399885" y3="3.71126014" z3="-1.08347852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14544881" y3="-2.98275747" z3="-1.69651844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9180976" y3="-3.15895455" z3="-0.54417043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10323177" y3="-2.28205581" z3="0.38756137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83688447" y3="-0.71927196" z3="0.64425673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73562873" y3="-0.27100693" z3="-0.92820384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5279528" y3="0.47390531" z3="1.1955047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04550718" y3="-1.05778256" z3="2.0328346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39337139" y3="-4.3712467" z3="-0.29895421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09270336" y3="-4.61081255" z3="0.91344378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05440086" y3="0.00735485" z3="-1.74807563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38534671" y3="0.60316648" z3="-0.74005394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37613863" y3="-1.1017741" z3="-1.27697301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64466394" y3="0.56666313" z3="0.53870561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1577668" y3="0.1927972" z3="2.196748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99951567" y3="1.47159946" z3="1.27506405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50656007" y3="-0.11116047" z3="2.3689274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86080847" y3="-1.73413441" z3="1.72031965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5307607" y3="-1.50944327" z3="2.89943243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03063405" y3="-4.03325237" z3="0.9421884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.470817" y3="-4.35229867" z3="1.78353737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.31927529" y3="-5.68432988" z3="0.91284135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27333069" y3="-2.20101099" z3="-0.18560327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13088449" y3="-3.29307398" z3="-1.05384463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48970325" y3="-4.45596963" z3="-0.64378192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99722496" y3="-4.52196097" z3="0.65419743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14295429" y3="-3.46784991" z3="1.55121146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77351719" y3="-2.30678636" z3="1.12196664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48671754" y3="-3.21419966" z3="-2.08435435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3483371" y3="-5.29259951" z3="-1.3287916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26647348" y3="-5.71620729" z3="1.07958762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73766926" y3="-3.55619981" z3="2.56031921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86521754" y3="-1.46218119" z3="1.80650752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49832931" y3="4.02621016" z3="-0.00863902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86733166" y3="3.80711869" z3="-0.0833607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3914746" y3="3.27009801" z3="-1.25390739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58889802" y3="2.98038375" z3="-2.35501161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22061269" y3="3.20007652" z3="-2.26132467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06380555" y3="4.3999458" z3="0.92214966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52523998" y3="4.02300445" z3="0.7587177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82451882" y3="2.97106055" z3="-1.32013704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.03733867" y3="2.57240238" z3="-3.26123278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4228385" y3="2.94766935" z3="-3.10536405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17743391" y3="-5.93517417" z3="2.26589584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77238828" y3="-6.41542533" z3="0.21395969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29161488" y3="2.65517904" z3="-2.39319099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46567411" y3="3.03795612" z3="-0.28800404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64029174" y3="0.16719589" z3="-1.99735002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96446863" y3="1.4142777" z3="-1.85936745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.83102646" y3="0.09932994" z3="-2.7722832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31920367" y3="1.21054754" z3="-3.41368339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34613815" y3="-0.86238517" z3="-2.85833653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.23287324" y3="1.14624759" z3="-4.01108451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47869109" y3="2.53905347" z3="-2.56357417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62395856" y3="2.4399477" z3="-3.3166273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94796932" y3="3.49165335" z3="-2.50844387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.99792277" y3="3.31780285" z3="-3.85107293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57377398" y3="3.9019965" z3="-0.23148473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75284867" y3="5.05272456" z3="-0.04530526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91637479" y3="3.95266524" z3="0.23849691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42552996" y3="5.09512718" z3="0.80784129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54689065" y3="3.06593487" z3="0.14933968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45987151" y3="5.10808122" z3="1.16274767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31270457" y3="6.22502532" z3="0.53386904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62178939" y3="6.25225008" z3="0.94602088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67362549" y3="7.10490729" z3="0.65718661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04070266" y3="7.15745862" z3="1.39434379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37314674" y3="-3.93590311" z3="-2.85347826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54180464" y3="-4.9731264" z3="-2.51993179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25861116" y3="-3.62227844" z3="-3.44171714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50733712" y3="-3.92536165" z3="-3.5344727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71614825" y3="-1.59573027" z3="-2.08933586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45742573" y3="-1.12859104" z3="-2.7606877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55307371" y3="-0.92615873" z3="-1.22812978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76786892" y3="-1.63696283" z3="-2.64987549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9161,-.9571,-.684;6.6083,-1.9505,-1.5359;6.0905,-.9961,-1.3994;4.7797,1.4769,-1.0552;4.2838,.3081,-.5035;2.6628,2.739,-1.1668;4.0079,2.7345,-.8422;2.3763,4.9926,-.3852;1.8122,3.8529,-.9084;1.7482,5.8681,-.1935;2.1048,1.6151,-1.7036;3.1153,.3519,.2007;1.7113,.3859,-.6729;.5982,.739,.2436;1.6666,-.8527,-1.5397;1.0881,-2.4648,-1.3447;1.95,-5.4974,-6.2999;1.697,-5.0597,-5.3299;1.0311,-3.911,-2.8674;1.6622,-3.6786,-5.1878;1.4283,-5.8827,-4.2334;1.1095,-5.3023,-3.012;1.3385,-3.0727,-3.9633;1.8791,-3.0141,-6.0278;1.4803,-6.9707,-4.3235;.9367,-5.9324,-2.1354;.6427,-3.3587,-1.6198;-.3481,-3.84,-.8608;-.6917,-4.8447,-1.1205;-.3675,-3.5305,.5866;-.3666,-3.0418,3.3425;-.6552,-4.5622,1.4871;-.0991,-2.2503,1.0776;-.0962,-2.0076,2.4466;-.6455,-4.3202,2.8595;-.8425,-5.5737,1.115;.0982,-1.4151,.4094;.1307,-1.0001,2.7989;-.8296,-5.1446,3.5565;-.3511,-2.8564,4.4204;1.2878,-1.7368,-3.9375;1.438,-1.3288,-3.0387;.344,3.7113,-1.0835;-2.1454,-2.9828,-1.6965;-2.9181,-3.159,-.5442;-3.1032,-2.2821,.3876;-3.8369,-.7193,.6443;-4.7356,-.271,-.9282;-2.528,.4739,1.1955;-5.0455,-1.0578,2.0328;-3.3934,-4.3712,-.299;-4.0927,-4.6108,.9134;-4.0544,.0074,-1.7481;-5.3853,.6032,-.7401;-5.3761,-1.1018,-1.277;-1.6447,.5667,.5387;-2.1578,.1928,2.1967;-2.9995,1.4716,1.2751;-5.5066,-.1112,2.3689;-5.8608,-1.7341,1.7203;-4.5308,-1.5094,2.8994;-5.0306,-4.0333,.9422;-3.4708,-4.3523,1.7835;-4.3193,-5.6843,.9128;4.2733,-2.201,-.1856;4.1309,-3.2931,-1.0538;3.4897,-4.456,-.6438;2.9972,-4.522,.6542;3.143,-3.4678,1.5512;3.7735,-2.3068,1.122;4.4867,-3.2142,-2.0844;3.3483,-5.2926,-1.3288;2.2665,-5.7162,1.0796;2.7377,-3.5562,2.5603;3.8652,-1.4622,1.8065;-.4983,4.0262,-.0086;-1.8673,3.8071,-.0834;-2.3915,3.2701,-1.2539;-1.5889,2.9804,-2.355;-.2206,3.2001,-2.2613;-.0638,4.3999,.9221;-2.5252,4.023,.7587;-3.8245,2.9711,-1.3201;-2.0373,2.5724,-3.2612;.4228,2.9477,-3.1054;2.1774,-5.9352,2.2659;1.7724,-6.4154,.214;-4.2916,2.6552,-2.3932;-4.4657,3.038,-.288;6.6403,.1672,-1.9974;5.9645,1.4143,-1.8594;7.831,.0993,-2.7723;8.3192,1.2105,-3.4137;8.3461,-.8624,-2.8583;9.2329,1.1462,-4.0111;6.4787,2.5391,-2.5636;7.624,2.4399,-3.3166;5.948,3.4917,-2.5084;7.9979,3.3178,-3.8511;4.5738,3.902,-.2315;3.7528,5.0527,-.0453;5.9164,3.9527,.2385;6.4255,5.0951,.8078;6.5469,3.0659,.1493;7.4599,5.1081,1.1627;4.3127,6.225,.5339;5.6218,6.2523,.946;3.6736,7.1049,.6572;6.0407,7.1575,1.3943;-2.3731,-3.9359,-2.8535;-2.5418,-4.9731,-2.5199;-3.2586,-3.6223,-3.4417;-1.5073,-3.9254,-3.5345;-1.7161,-1.5957,-2.0893;-2.4574,-1.1286,-2.7607;-1.5531,-.9262,-1.2281;-.7679,-1.637,-2.6499;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662878544392</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003568492288 0.000580183076 0.019181608885 0.005339344637</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056871994 -0.002244752 0.000178641 0.000273056 0.000336845 0.000404489 0.000416690 0.000523538 0.000583449 0.000658062 0.000780402 0.000891919 0.001062302 0.001118932 0.001280945 0.001332523 0.001365456 0.001519518 0.001730939 0.001871556 0.002115939 0.002327145 0.002434972 0.003041962 0.003218918 0.003679919 0.003938705 0.004031868 0.004362267 0.004611668 0.004892596 0.005139215 0.005660054 0.005951021 0.006082596 0.006609040 0.006834741 0.007136933 0.007376163 0.008010224 0.008290729 0.008865707 0.009457352 0.009737289 0.010808721 0.011026527 0.011087962 0.011869760 0.013097735 0.013247574 0.013772609 0.014529777 0.014823766 0.015403801 0.015658059 0.015959707 0.016396855 0.016830856 0.017923720 0.018711013 0.019663254 0.020230634 0.021011911 0.021525217 0.022060511 0.022673489 0.023329729 0.023576348 0.024429605 0.025813471 0.026312682 0.026550735 0.026946555 0.027103358 0.027943198 0.028630549 0.030197650 0.030463457 0.032552390 0.032816112 0.034293377 0.035549165 0.038734892 0.039037569 0.041744372 0.043343281 0.045337329 0.045637289 0.046411384 0.048596864 0.049647845 0.050091700 0.051519514 0.051833531 0.051978253 0.052282866 0.052380402 0.052750882 0.053319574 0.055234549 0.056218609 0.056456174 0.056561383 0.056957602 0.057412426 0.058044700 0.058839761 0.059247721 0.060666273 0.061277030 0.061833390 0.063373492 0.064159985 0.064813495 0.065411802 0.066662809 0.067491812 0.068746848 0.069427962 0.071652914 0.072011486 0.072394883 0.072883997 0.075257665 0.076914125 0.080459505 0.081059900 0.083060892 0.083275739 0.086426201 0.088344632 0.089265033 0.089750635 0.091229714 0.093195520 0.094455639 0.095360793 0.095961413 0.096784130 0.097948253 0.099954635 0.100331889 0.101373453 0.102424713 0.103143726 0.103893999 0.104757784 0.107946214 0.110460064 0.111755284 0.112021504 0.113077793 0.114110286 0.116045506 0.116683056 0.117218506 0.118430365 0.121661281 0.124326401 0.125042618 0.128011553 0.128316342 0.129733651 0.133035629 0.135875432 0.136758805 0.138211874 0.138482425 0.139750300 0.141649109 0.143416493 0.145524923 0.146133760 0.151610759 0.153106762 0.153271597 0.159807061 0.160738334 0.168200825 0.171162160 0.174890482 0.178665103 0.181219655 0.183745456 0.187869370 0.188472366 0.190544835 0.199972187 0.201940446 0.205652827 0.206609177 0.207184656 0.209183975 0.211783803 0.212494722 0.213426126 0.216446138 0.218235124 0.220526991 0.223438240 0.225363674 0.231747780 0.233038562 0.234591496 0.238299463 0.245039503 0.247118258 0.250158199 0.255511763 0.256490304 0.257145175 0.262151377 0.271459485 0.282616916 0.291646193 0.299311671 0.299849358 0.300692868 0.306943059 0.307675799 0.309593102 0.318319729 0.321096079 0.326173240 0.328091838 0.335208073 0.347253064 0.351273873 0.355545867 0.359191662 0.359917153 0.364001369 0.383883617 0.406535801 0.411754737 0.430045502 0.431639317 0.433116265 0.447404909 0.464128561 0.467523690 0.473418331 0.477930778 0.485927477 0.498112014 0.501960506 0.513759341 0.516132191 0.543140962 0.565557172 0.567255327 0.584115538 0.591760125 0.605601613 0.642333714 0.645038273 0.665672973 0.675269471 0.685472586 0.692169144 0.700713476 0.702393828 0.704250170 0.716921653 0.731012496 0.736514825 0.737959557 0.747096442 0.750737250 0.771600979 0.775948134 0.807181187 0.818710102 0.821568782 0.827913353 0.833770102 0.845870020 0.847176132 0.848215691 0.853297467 0.859797367 0.867382055 0.874880408 0.880826528 0.886984240 0.888896782 0.892240227 0.900766495 0.908113509 0.915422953 0.917584068 0.924384772 0.931629278 0.934364248 0.953062100 0.956405361 0.960357478 0.969525988 0.975027681 0.982146223 0.998501189 1.004286624 1.012834736 1.018707663 1.038962907 1.049646158 1.055397688 1.069022140 1.076729172 1.087020790 1.103204245 1.110238890 1.111573842 1.117813093 1.122496140 1.123498933 1.134951847 1.146253898 1.161435288 1.169927714 1.175956572 1.176669662 1.200555658 1.218619296 1.231012359 1.247634721 1.295779076 1.296296445 1.314560980 1.326249523 1.326610327 1.329839281 1.330181947 1.334629573 1.341246444 1.347205186 1.362575422 1.378833249 1.380937830 1.381538048 1.426308683 1.509517980 1.557860397 1.672327277 1.918035846</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">144</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91813062" y3="-0.95692936" z3="-0.68247794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6119694" y3="-1.94984572" z3="-1.53148345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09387082" y3="-0.99556263" z3="-1.39550691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78199872" y3="1.47726385" z3="-1.0527663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28524886" y3="0.30798342" z3="-0.50268568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66483129" y3="2.73834651" z3="-1.16918377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00908733" y3="2.7345308" z3="-0.84132615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37565933" y3="4.99197288" z3="-0.3891917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81313033" y3="3.85195779" z3="-0.91328551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74683562" y3="5.86734187" z3="-0.1992992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1086154" y3="1.6141102" z3="-1.70709919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11511609" y3="0.35093075" z3="0.19910863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71306678" y3="0.38470799" z3="-0.67735453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59791925" y3="0.73756217" z3="0.23686648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66987995" y3="-0.85380618" z3="-1.54450473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08675726" y3="-2.46526094" z3="-1.34682695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9369565" y3="-5.49608375" z3="-6.305206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.68648695" y3="-5.05836402" z3="-5.33465174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02649869" y3="-3.90987558" z3="-2.87066619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.65169245" y3="-3.67735446" z3="-5.19248931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.42116827" y3="-5.88139478" z3="-4.23740896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.10523673" y3="-5.30106999" z3="-3.01534419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33115357" y3="-3.07146733" z3="-3.96724789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.86619005" y3="-3.01288664" z3="-6.03308621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.47347328" y3="-6.96930606" z3="-4.32752301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93494735" y3="-5.93116547" z3="-2.13823499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63984588" y3="-3.35805824" z3="-1.62233946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34928209" y3="-3.8405048" z3="-0.86161319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69395257" y3="-4.84449289" z3="-1.12229044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36571978" y3="-3.53254327" z3="0.58612443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35835012" y3="-3.04262945" z3="3.34326389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.64955936" y3="-4.5656606" z3="1.48893874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09904187" y3="-2.24916383" z3="1.07528722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09242106" y3="-2.00650547" z3="2.44471397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63712038" y3="-4.32283504" z3="2.86178866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84037665" y3="-5.57672278" z3="1.11756382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08525827" y3="-1.40733978" z3="0.40107802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12747639" y3="-0.99117724" z3="2.7927272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.82900321" y3="-5.14349429" z3="3.55521163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34371306" y3="-2.85490546" z3="4.42095036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2804499" y3="-1.73558305" z3="-3.94086764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43590602" y3="-1.32841308" z3="-3.04282723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34535359" y3="3.70925549" z3="-1.09099495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14811854" y3="-2.98109575" z3="-1.69411245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91985051" y3="-3.15851461" z3="-0.54224863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10348527" y3="-2.2821699" z3="0.39063628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83571681" y3="-0.72011165" z3="0.64981218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74346868" y3="-0.27516223" z3="-0.91771631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52635947" y3="0.47641632" z3="1.19245015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03470651" y3="-1.05879584" z3="2.04591726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39601856" y3="-4.37080376" z3="-0.29809294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09318474" y3="-4.61062098" z3="0.91520027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06733197" y3="-0.00296338" z3="-1.7432552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38950869" y3="0.60133565" z3="-0.7284915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38787489" y3="-1.10580673" z3="-1.2577914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64371292" y3="0.56724609" z3="0.53246828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15199406" y3="0.19959892" z3="2.19349835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99914132" y3="1.4721988" z3="1.27212502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49480473" y3="-0.11351801" z3="2.38560966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85055594" y3="-1.73676867" z3="1.73906076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.51399396" y3="-1.50919078" z3="2.90988192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03100527" y3="-4.03216392" z3="0.94617816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.46825825" y3="-4.35191076" z3="1.78456706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.31992321" y3="-5.68564014" z3="0.91570473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27429249" y3="-2.20096133" z3="-0.18569625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13056383" y3="-3.29168121" z3="-1.05530359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48799911" y3="-4.45411688" z3="-0.64663799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99565378" y3="-4.5210021" z3="0.65134928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14289831" y3="-3.46841769" z3="1.54972104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77457634" y3="-2.30766851" z3="1.12179559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48668723" y3="-3.21203967" z3="-2.08566782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34602332" y3="-5.28997057" z3="-1.33247151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26572891" y3="-5.71614585" z3="1.07650186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73824777" y3="-3.55797515" z3="2.55895379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86758867" y3="-1.46416886" z3="1.80738604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49944954" y3="4.02691901" z3="-0.01875511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86814621" y3="3.80624109" z3="-0.09586529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38946037" y3="3.26472966" z3="-1.265987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58408679" y3="2.97166797" z3="-2.36369716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21628149" y3="3.19313291" z3="-2.2678581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06735519" y3="4.4045882" z3="0.91116912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52807662" y3="4.02413906" z3="0.74429376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82169978" y3="2.96280006" z3="-1.33309904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.03051609" y3="2.56047064" z3="-3.27004952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.42933704" y3="2.93788015" z3="-3.10956632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18116304" y3="-5.93898922" z3="2.26386427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76929984" y3="-6.41304167" z3="0.21026733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28593798" y3="2.64007508" z3="-2.40551393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46536378" y3="3.03461214" z3="-0.30282437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64481675" y3="0.16821318" z3="-1.99158655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96855941" y3="1.41516603" z3="-1.85435119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.83724434" y3="0.10085291" z3="-2.7639536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.32675811" y3="1.2124238" z3="-3.40372586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.35261737" y3="-0.86076969" z3="-2.84933411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.24175435" y3="1.14849268" z3="-3.99916136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4842669" y3="2.5403317" z3="-2.55687392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.63118586" y3="2.44169195" z3="-3.30752721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95338323" y3="3.49289066" z3="-2.5023954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.00623891" y3="3.31983445" z3="-3.84074131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57292336" y3="3.90228216" z3="-0.22927731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75114152" y3="5.05268434" z3="-0.04544871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91430032" y3="3.95345284" z3="0.24423246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42162583" y3="5.09604264" z3="0.81491137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5453159" y3="3.06693606" z3="0.15658065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45513885" y3="5.10929477" z3="1.17251134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30905803" y3="6.2251615" z3="0.53530384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6171189" y3="6.25282345" z3="0.95095699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66942322" y3="7.10478497" z3="0.65684455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0346" y3="7.15814375" z3="1.40036267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37679205" y3="-3.9299977" z3="-2.85312795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55174334" y3="-4.96456499" z3="-2.52739492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25617668" y3="-3.60781" z3="-3.43833779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51090797" y3="-3.92151498" z3="-3.53394385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71807762" y3="-1.59284521" z3="-2.08415338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45947537" y3="-1.12469505" z3="-2.75807881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55248198" y3="-0.92848195" z3="-1.2235731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77149523" y3="-1.63435526" z3="-2.64630714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9181,-.9569,-.6825;6.612,-1.9498,-1.5315;6.0939,-.9956,-1.3955;4.782,1.4773,-1.0528;4.2852,.308,-.5027;2.6648,2.7383,-1.1692;4.0091,2.7345,-.8413;2.3757,4.992,-.3892;1.8131,3.852,-.9133;1.7468,5.8673,-.1993;2.1086,1.6141,-1.7071;3.1151,.3509,.1991;1.7131,.3847,-.6774;.5979,.7376,.2369;1.6699,-.8538,-1.5445;1.0868,-2.4653,-1.3468;1.937,-5.4961,-6.3052;1.6865,-5.0584,-5.3347;1.0265,-3.9099,-2.8707;1.6517,-3.6774,-5.1925;1.4212,-5.8814,-4.2374;1.1052,-5.3011,-3.0153;1.3312,-3.0715,-3.9672;1.8662,-3.0129,-6.0331;1.4735,-6.9693,-4.3275;.9349,-5.9312,-2.1382;.6398,-3.3581,-1.6223;-.3493,-3.8405,-.8616;-.694,-4.8445,-1.1223;-.3657,-3.5325,.5861;-.3584,-3.0426,3.3433;-.6496,-4.5657,1.4889;-.099,-2.2492,1.0753;-.0924,-2.0065,2.4447;-.6371,-4.3228,2.8618;-.8404,-5.5767,1.1176;.0853,-1.4073,.4011;.1275,-.9912,2.7927;-.829,-5.1435,3.5552;-.3437,-2.8549,4.421;1.2804,-1.7356,-3.9409;1.4359,-1.3284,-3.0428;.3454,3.7093,-1.091;-2.1481,-2.9811,-1.6941;-2.9199,-3.1585,-.5422;-3.1035,-2.2822,.3906;-3.8357,-.7201,.6498;-4.7435,-.2752,-.9177;-2.5264,.4764,1.1925;-5.0347,-1.0588,2.0459;-3.396,-4.3708,-.2981;-4.0932,-4.6106,.9152;-4.0673,-.003,-1.7433;-5.3895,.6013,-.7285;-5.3879,-1.1058,-1.2578;-1.6437,.5672,.5325;-2.152,.1996,2.1935;-2.9991,1.4722,1.2721;-5.4948,-.1135,2.3856;-5.8506,-1.7368,1.7391;-4.514,-1.5092,2.9099;-5.031,-4.0322,.9462;-3.4683,-4.3519,1.7846;-4.3199,-5.6856,.9157;4.2743,-2.201,-.1857;4.1306,-3.2917,-1.0553;3.488,-4.4541,-.6466;2.9957,-4.521,.6513;3.1429,-3.4684,1.5497;3.7746,-2.3077,1.1218;4.4867,-3.212,-2.0857;3.346,-5.29,-1.3325;2.2657,-5.7161,1.0765;2.7382,-3.558,2.559;3.8676,-1.4642,1.8074;-.4994,4.0269,-.0188;-1.8681,3.8062,-.0959;-2.3895,3.2647,-1.266;-1.5841,2.9717,-2.3637;-.2163,3.1931,-2.2679;-.0674,4.4046,.9112;-2.5281,4.0241,.7443;-3.8217,2.9628,-1.3331;-2.0305,2.5605,-3.27;.4293,2.9379,-3.1096;2.1812,-5.939,2.2639;1.7693,-6.413,.2103;-4.2859,2.6401,-2.4055;-4.4654,3.0346,-.3028;6.6448,.1682,-1.9916;5.9686,1.4152,-1.8544;7.8372,.1009,-2.764;8.3268,1.2124,-3.4037;8.3526,-.8608,-2.8493;9.2418,1.1485,-3.9992;6.4843,2.5403,-2.5569;7.6312,2.4417,-3.3075;5.9534,3.4929,-2.5024;8.0062,3.3198,-3.8407;4.5729,3.9023,-.2293;3.7511,5.0527,-.0454;5.9143,3.9535,.2442;6.4216,5.096,.8149;6.5453,3.0669,.1566;7.4551,5.1093,1.1725;4.3091,6.2252,.5353;5.6171,6.2528,.951;3.6694,7.1048,.6568;6.0346,7.1581,1.4004;-2.3768,-3.93,-2.8531;-2.5517,-4.9646,-2.5274;-3.2562,-3.6078,-3.4383;-1.5109,-3.9215,-3.5339;-1.7181,-1.5928,-2.0842;-2.4595,-1.1247,-2.7581;-1.5525,-.9285,-1.2236;-.7715,-1.6344,-2.6463;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662875979540</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003756864020 0.000556270196 0.021631926870 0.005338411065</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056872577 -0.001956304 0.000179910 0.000273065 0.000336788 0.000404435 0.000421321 0.000523926 0.000589569 0.000660754 0.000782019 0.000892494 0.001062277 0.001125978 0.001281271 0.001332485 0.001366273 0.001519758 0.001759835 0.001895864 0.002124321 0.002331589 0.002433913 0.003045978 0.003248073 0.003707554 0.004012627 0.004053032 0.004356829 0.004611890 0.004892615 0.005141976 0.005670272 0.005961820 0.006083539 0.006611405 0.006835567 0.007138717 0.007376366 0.008053547 0.008314091 0.008921578 0.009494656 0.009736689 0.010808099 0.011043011 0.011089970 0.011879768 0.013144315 0.013255009 0.013788622 0.014530835 0.014834425 0.015404748 0.015657874 0.016081332 0.016400536 0.016830395 0.017925969 0.018855272 0.019699690 0.020231733 0.021011750 0.021527686 0.022071898 0.022674066 0.023332603 0.023580438 0.024435932 0.025815700 0.026315397 0.026550748 0.026949423 0.027111401 0.027949746 0.028641289 0.030198152 0.030467564 0.032573613 0.032852512 0.034293238 0.035561761 0.038741248 0.039070790 0.041759157 0.044178362 0.045337457 0.045641832 0.046616122 0.048608940 0.049649142 0.050092544 0.051519509 0.051834060 0.051978277 0.052282871 0.052380472 0.052787342 0.053321713 0.055262865 0.056221243 0.056457104 0.056565356 0.056957682 0.057460833 0.058083970 0.058866276 0.059250316 0.060679536 0.061396409 0.061928630 0.063516931 0.064159235 0.064813553 0.065425852 0.066662650 0.067499513 0.068764843 0.069436345 0.071652968 0.072012202 0.072397456 0.072884121 0.075260156 0.077001761 0.080461941 0.081082259 0.083061705 0.083275464 0.086426133 0.088351327 0.089266071 0.089750862 0.091233526 0.093196326 0.094456198 0.095361298 0.095964458 0.096784223 0.097947949 0.099955471 0.100332177 0.101385001 0.102424600 0.103165172 0.103893616 0.104783878 0.107946668 0.110463932 0.111755474 0.112026809 0.113086002 0.114109229 0.116050882 0.116686589 0.117255876 0.118430536 0.121662380 0.124334943 0.125047843 0.128063248 0.128394903 0.129755457 0.133148086 0.135898906 0.137077847 0.138215944 0.138484755 0.139759775 0.141651052 0.143416266 0.145524944 0.146133801 0.151611098 0.153112675 0.153274013 0.159889934 0.160777627 0.168202749 0.171163378 0.174901646 0.178682962 0.181233339 0.183781872 0.188161421 0.188630975 0.190871132 0.200288665 0.201948229 0.205657303 0.206619353 0.207185052 0.209306925 0.211789276 0.212496116 0.213426145 0.216445783 0.218237509 0.220526971 0.223548280 0.225363868 0.231747897 0.233144204 0.234592253 0.238301300 0.245043493 0.247123617 0.250166584 0.255512175 0.256490884 0.257145738 0.262151082 0.271459476 0.282619431 0.291647360 0.299312628 0.299849389 0.300693207 0.306944628 0.307675805 0.309593081 0.318354327 0.321096595 0.326174763 0.328101954 0.335208250 0.347259014 0.351282300 0.355547834 0.359222667 0.360006339 0.364002585 0.383884008 0.406536737 0.411756525 0.430047092 0.431647515 0.433162482 0.447948774 0.464128736 0.469093694 0.473430902 0.477945187 0.486104179 0.498156472 0.502175382 0.513761842 0.516162160 0.543152335 0.565585943 0.567260763 0.584272901 0.591761427 0.605602105 0.642459754 0.645038389 0.665695006 0.675273718 0.685473540 0.692208594 0.700713626 0.702608995 0.704250373 0.716926246 0.731012415 0.736519063 0.737959593 0.747106501 0.750737358 0.771600978 0.775948259 0.807224738 0.818758238 0.821571130 0.827913355 0.833770097 0.845947924 0.847179622 0.848520510 0.853313087 0.859860686 0.867382055 0.874881406 0.880900447 0.887081752 0.889192466 0.892259063 0.900768627 0.908116537 0.915425480 0.917595419 0.924385538 0.931629468 0.934416731 0.953261637 0.956492947 0.960953863 0.969529149 0.975135612 0.982151287 0.998501225 1.004287342 1.012885750 1.018721744 1.038962982 1.049665184 1.055403670 1.069024087 1.076732388 1.087022711 1.103204179 1.110239221 1.111573867 1.117819422 1.122496192 1.123498949 1.134974572 1.146571304 1.161468573 1.169928121 1.176403498 1.177455392 1.200559947 1.218828705 1.231054068 1.247809177 1.295828683 1.296297432 1.314564558 1.326249685 1.326615088 1.329839801 1.330184771 1.334629984 1.341288180 1.347450774 1.362586248 1.378842040 1.380939707 1.381538091 1.426316455 1.509564175 1.557863417 1.672539593 1.918040292</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">145</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92042524" y3="-0.9567091" z3="-0.68074097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61577113" y3="-1.94913569" z3="-1.52733276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0974415" y3="-0.99492412" z3="-1.39167512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7845402" y3="1.4775133" z3="-1.0502597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28704141" y3="0.3079842" z3="-0.50146515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66705435" y3="2.737301" z3="-1.17180401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01047877" y3="2.73431008" z3="-0.84063827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3746751" y3="4.99104302" z3="-0.39277472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8139932" y3="3.85056462" z3="-0.91801266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74499952" y3="5.86625684" z3="-0.204654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11297376" y3="1.61254735" z3="-1.71076627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1155254" y3="0.35037071" z3="0.19806697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71531766" y3="0.38358248" z3="-0.68138167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59813453" y3="0.73691508" z3="0.23012791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67458294" y3="-0.85524841" z3="-1.54801201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08702718" y3="-2.46466792" z3="-1.34966642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.92395013" y3="-5.49428316" z3="-6.31111228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.67602936" y3="-5.05679309" z3="-5.33981402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02265835" y3="-3.90889131" z3="-2.8737625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.64194648" y3="-3.67582271" z3="-5.19717126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.41329152" y3="-5.8800318" z3="-4.24215535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.10059227" y3="-5.3000299" z3="-3.01907602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32468166" y3="-3.07034413" z3="-3.9709462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85442142" y3="-3.01114207" z3="-6.03808441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.46510823" y3="-6.96788985" z3="-4.33281892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93191728" y3="-5.93025729" z3="-2.14180727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63904777" y3="-3.35721572" z3="-1.62445595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35106419" y3="-3.83675342" z3="-0.86372242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69616002" y3="-4.84141133" z3="-1.12295318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3660314" y3="-3.52892297" z3="0.58417336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36159972" y3="-3.04073653" z3="3.33995373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65120982" y3="-4.56191035" z3="1.48493758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09799912" y3="-2.24784367" z3="1.07496368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09266294" y3="-2.00593492" z3="2.44409773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64017922" y3="-4.319929" z3="2.85722028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.83813663" y3="-5.57452958" z3="1.11342129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09803801" y3="-1.41175764" z3="0.40780634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13317102" y3="-0.99719436" z3="2.79589068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.82448687" y3="-5.14458099" z3="3.55350434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34475579" y3="-2.85524904" z3="4.4178768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27404354" y3="-1.73439184" z3="-3.94379364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43350553" y3="-1.3279127" z3="-3.04608466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34681438" y3="3.70660317" z3="-1.0987012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14853362" y3="-2.97768017" z3="-1.69211951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91857807" y3="-3.15725903" z3="-0.53800746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10084606" y3="-2.28296831" z3="0.39653747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83406923" y3="-0.72021838" z3="0.65723261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75110129" y3="-0.28038837" z3="-0.90638483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52384386" y3="0.47955877" z3="1.19135107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0248084" y3="-1.0584626" z3="2.06123876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39354201" y3="-4.37030796" z3="-0.29462191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09226682" y3="-4.61122807" z3="0.91692898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.07898679" y3="-0.01484042" z3="-1.73784068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.392198" y3="0.60048082" z3="-0.71875831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.40156344" y3="-1.11014971" z3="-1.23848469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64432022" y3="0.57026056" z3="0.52811629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14520917" y3="0.2063709" z3="2.19179279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99800468" y3="1.47592728" z3="1.2688765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.4833718" y3="-0.11219858" z3="2.402247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.84230749" y3="-1.73701113" z3="1.76069268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.49782746" y3="-1.5079109" z3="2.92167959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03180598" y3="-4.03443368" z3="0.94417204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47090719" y3="-4.35128657" z3="1.78797599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.31641372" y3="-5.68665252" z3="0.91612733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27562677" y3="-2.20089514" z3="-0.18554936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13042643" y3="-3.29020522" z3="-1.05665369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48708796" y3="-4.45278031" z3="-0.64918903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99609675" y3="-4.52154227" z3="0.64925571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14422612" y3="-3.46997017" z3="1.54883987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77620745" y3="-2.30878659" z3="1.12191286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48597266" y3="-3.20917782" z3="-2.08709137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34319015" y3="-5.28705357" z3="-1.33630877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26514681" y3="-5.71629659" z3="1.07282041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73975358" y3="-3.56035127" z3="2.55809342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86969634" y3="-1.46576457" z3="1.80827074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50078167" y3="4.02783804" z3="-0.03000329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86914987" y3="3.80570469" z3="-0.10935765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38740189" y3="3.25802005" z3="-1.27765536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57935209" y3="2.9616597" z3="-2.37228483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21224701" y3="3.18625579" z3="-2.27540886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07171179" y3="4.41044831" z3="0.8988725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53062994" y3="4.02605414" z3="0.72927797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81872404" y3="2.95282757" z3="-1.34540484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.02299418" y3="2.54538886" z3="-3.27725652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.43424561" y3="2.93092397" z3="-3.11739866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18071339" y3="-5.94069148" z3="2.25922207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7664581" y3="-6.41048956" z3="0.20572589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28020836" y3="2.62305306" z3="-2.41688802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46465186" y3="3.0298453" z3="-0.3170203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64946792" y3="0.16928296" z3="-1.98597319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.97277328" y3="1.41607031" z3="-1.84937299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.84344305" y3="0.10257495" z3="-2.75599941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.3341149" y3="1.21462455" z3="-3.39405653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.35912035" y3="-0.85892894" z3="-2.84096741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.25030446" y3="1.15118613" z3="-3.98769304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48976503" y3="2.54175796" z3="-2.55012359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6382319" y3="2.44376988" z3="-3.29845656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95870302" y3="3.49423997" z3="-2.49613258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.01427413" y3="3.32234049" z3="-3.83027157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57217213" y3="3.90237353" z3="-0.22733021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74929655" y3="5.05242214" z3="-0.04561652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91235019" y3="3.95415509" z3="0.24946635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41758799" y3="5.09696647" z3="0.82150392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54405531" y3="3.06791542" z3="0.16318661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45017991" y3="5.11073825" z3="1.1816604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30511874" y3="6.2251568" z3="0.5366261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61202732" y3="6.25337885" z3="0.95574215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66469268" y3="7.10449749" z3="0.65661556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.02785245" y3="7.15885001" z3="1.40638886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38068994" y3="-3.92679545" z3="-2.85181013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55172057" y3="-4.96430088" z3="-2.52116575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26543179" y3="-3.6085294" z3="-3.43746787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51621986" y3="-3.91699494" z3="-3.53451768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72147489" y3="-1.58812347" z3="-2.08404078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46464045" y3="-1.12042947" z3="-2.7547186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55432387" y3="-0.92023866" z3="-1.22369926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77576989" y3="-1.62945764" z3="-2.6477858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9204,-.9567,-.6807;6.6158,-1.9491,-1.5273;6.0974,-.9949,-1.3917;4.7845,1.4775,-1.0503;4.287,.308,-.5015;2.6671,2.7373,-1.1718;4.0105,2.7343,-.8406;2.3747,4.991,-.3928;1.814,3.8506,-.918;1.745,5.8663,-.2047;2.113,1.6125,-1.7108;3.1155,.3504,.1981;1.7153,.3836,-.6814;.5981,.7369,.2301;1.6746,-.8552,-1.548;1.087,-2.4647,-1.3497;1.924,-5.4943,-6.3111;1.676,-5.0568,-5.3398;1.0227,-3.9089,-2.8738;1.6419,-3.6758,-5.1972;1.4133,-5.88,-4.2422;1.1006,-5.3,-3.0191;1.3247,-3.0703,-3.9709;1.8544,-3.0111,-6.0381;1.4651,-6.9679,-4.3328;.9319,-5.9303,-2.1418;.639,-3.3572,-1.6245;-.3511,-3.8368,-.8637;-.6962,-4.8414,-1.123;-.366,-3.5289,.5842;-.3616,-3.0407,3.34;-.6512,-4.5619,1.4849;-.098,-2.2478,1.075;-.0927,-2.0059,2.4441;-.6402,-4.3199,2.8572;-.8381,-5.5745,1.1134;.098,-1.4118,.4078;.1332,-.9972,2.7959;-.8245,-5.1446,3.5535;-.3448,-2.8552,4.4179;1.274,-1.7344,-3.9438;1.4335,-1.3279,-3.0461;.3468,3.7066,-1.0987;-2.1485,-2.9777,-1.6921;-2.9186,-3.1573,-.538;-3.1008,-2.283,.3965;-3.8341,-.7202,.6572;-4.7511,-.2804,-.9064;-2.5238,.4796,1.1914;-5.0248,-1.0585,2.0612;-3.3935,-4.3703,-.2946;-4.0923,-4.6112,.9169;-4.079,-.0148,-1.7378;-5.3922,.6005,-.7188;-5.4016,-1.1101,-1.2385;-1.6443,.5703,.5281;-2.1452,.2064,2.1918;-2.998,1.4759,1.2689;-5.4834,-.1122,2.4022;-5.8423,-1.737,1.7607;-4.4978,-1.5079,2.9217;-5.0318,-4.0344,.9442;-3.4709,-4.3513,1.788;-4.3164,-5.6867,.9161;4.2756,-2.2009,-.1855;4.1304,-3.2902,-1.0567;3.4871,-4.4528,-.6492;2.9961,-4.5215,.6493;3.1442,-3.47,1.5488;3.7762,-2.3088,1.1219;4.486,-3.2092,-2.0871;3.3432,-5.2871,-1.3363;2.2651,-5.7163,1.0728;2.7398,-3.5604,2.5581;3.8697,-1.4658,1.8083;-.5008,4.0278,-.03;-1.8691,3.8057,-.1094;-2.3874,3.258,-1.2777;-1.5794,2.9617,-2.3723;-.2122,3.1863,-2.2754;-.0717,4.4104,.8989;-2.5306,4.0261,.7293;-3.8187,2.9528,-1.3454;-2.023,2.5454,-3.2773;.4342,2.9309,-3.1174;2.1807,-5.9407,2.2592;1.7665,-6.4105,.2057;-4.2802,2.6231,-2.4169;-4.4647,3.0298,-.317;6.6495,.1693,-1.986;5.9728,1.4161,-1.8494;7.8434,.1026,-2.756;8.3341,1.2146,-3.3941;8.3591,-.8589,-2.841;9.2503,1.1512,-3.9877;6.4898,2.5418,-2.5501;7.6382,2.4438,-3.2985;5.9587,3.4942,-2.4961;8.0143,3.3223,-3.8303;4.5722,3.9024,-.2273;3.7493,5.0524,-.0456;5.9124,3.9542,.2495;6.4176,5.097,.8215;6.5441,3.0679,.1632;7.4502,5.1107,1.1817;4.3051,6.2252,.5366;5.612,6.2534,.9557;3.6647,7.1045,.6566;6.0279,7.1589,1.4064;-2.3807,-3.9268,-2.8518;-2.5517,-4.9643,-2.5212;-3.2654,-3.6085,-3.4375;-1.5162,-3.917,-3.5345;-1.7215,-1.5881,-2.084;-2.4646,-1.1204,-2.7547;-1.5543,-.9202,-1.2237;-.7758,-1.6295,-2.6478;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662880751333</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003695466492 0.000465327813 0.020548259820 0.005335526072</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056872519 -0.001424151 0.000179749 0.000273456 0.000337998 0.000404405 0.000421012 0.000524355 0.000590304 0.000661794 0.000781622 0.000892313 0.001062237 0.001127855 0.001281218 0.001332600 0.001366289 0.001519900 0.001764544 0.001895377 0.002125106 0.002331338 0.002440292 0.003047213 0.003266732 0.003712528 0.004009343 0.004092415 0.004406783 0.004612991 0.004893457 0.005145388 0.005671227 0.005961590 0.006118083 0.006611110 0.006837199 0.007139232 0.007379893 0.008061583 0.008318713 0.008941108 0.009552831 0.009745427 0.010808755 0.011057705 0.011098926 0.011890844 0.013159780 0.013257466 0.013793958 0.014532850 0.014842184 0.015405502 0.015657961 0.016133613 0.016402297 0.016831276 0.017929179 0.018921393 0.019724147 0.020233458 0.021011607 0.021530011 0.022081566 0.022674802 0.023333919 0.023583683 0.024441267 0.025818039 0.026315798 0.026550981 0.026954874 0.027125634 0.027949977 0.028640166 0.030199884 0.030468280 0.032605044 0.032883507 0.034296110 0.035572050 0.038751145 0.039105188 0.041766814 0.044732495 0.045337967 0.045641481 0.046958093 0.048621650 0.049651478 0.050096324 0.051519569 0.051842149 0.051978776 0.052282877 0.052380465 0.052790340 0.053322317 0.055285144 0.056222960 0.056458334 0.056570424 0.056957712 0.057490576 0.058124422 0.058885940 0.059252931 0.060693960 0.061469782 0.062012630 0.063617812 0.064159438 0.064813589 0.065429001 0.066663070 0.067521978 0.068772667 0.069468130 0.071668989 0.072019781 0.072404930 0.072884257 0.075260751 0.077168765 0.080465095 0.081102436 0.083066118 0.083275573 0.086426309 0.088380221 0.089266188 0.089751019 0.091236636 0.093196239 0.094457448 0.095361917 0.095965328 0.096784227 0.097953355 0.099957215 0.100334327 0.101426316 0.102426425 0.103201563 0.103897355 0.104810889 0.107950932 0.110464441 0.111758045 0.112026773 0.113103250 0.114116643 0.116050898 0.116687146 0.117290005 0.118430734 0.121663171 0.124335816 0.125047326 0.128079771 0.128441256 0.129755642 0.133179890 0.135901753 0.137122017 0.138227576 0.138496586 0.139759056 0.141651135 0.143417899 0.145526873 0.146134107 0.151611716 0.153129989 0.153278941 0.159915320 0.160803263 0.168217718 0.171163492 0.174908316 0.178687573 0.181242377 0.183789898 0.188255664 0.188713455 0.191097198 0.200466381 0.201948305 0.205658169 0.206625194 0.207185805 0.209485626 0.211791068 0.212496416 0.213426850 0.216447183 0.218237515 0.220531079 0.223712629 0.225364272 0.231748004 0.233201945 0.234592701 0.238301470 0.245057858 0.247143133 0.250182877 0.255515476 0.256491015 0.257145841 0.262159874 0.271459575 0.282622279 0.291647330 0.299320117 0.299850413 0.300694230 0.306944802 0.307675835 0.309593093 0.318391855 0.321096825 0.326178983 0.328101934 0.335208554 0.347259062 0.351299814 0.355547852 0.359224662 0.360093493 0.364002613 0.383885847 0.406541549 0.411762018 0.430047613 0.431652059 0.433189847 0.448390531 0.464129069 0.470659061 0.473472312 0.477945832 0.486185443 0.498210195 0.502294712 0.513772463 0.516162507 0.543153313 0.565586873 0.567260958 0.584428273 0.591762546 0.605602141 0.642545622 0.645038421 0.665735596 0.675273843 0.685474056 0.692208463 0.700797633 0.702608932 0.704250993 0.716929074 0.731070158 0.736613283 0.737959657 0.747106639 0.750737748 0.771601068 0.775948808 0.807276920 0.818773174 0.821571771 0.827914477 0.833771092 0.846051766 0.847183130 0.848657807 0.853368466 0.859898473 0.867382441 0.874882277 0.880968045 0.887092343 0.889277519 0.892267982 0.900770988 0.908144007 0.915427224 0.917597721 0.924386266 0.931633271 0.934501151 0.953294140 0.956512753 0.961296286 0.969539960 0.975149114 0.982152413 0.998501530 1.004287583 1.012983032 1.018742678 1.038963628 1.049665105 1.055404312 1.069029870 1.076736885 1.087029469 1.103211394 1.110239887 1.111573910 1.117824884 1.122496209 1.123499073 1.134982581 1.146899880 1.161493836 1.169930257 1.176476019 1.178666497 1.200561322 1.219086354 1.231054109 1.247818102 1.295923900 1.296298870 1.314564568 1.326250099 1.326616405 1.329843651 1.330186536 1.334633043 1.341288730 1.347538962 1.362750404 1.378842254 1.380939695 1.381538121 1.426316810 1.509597611 1.557866571 1.672546559 1.918057143</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">146</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92296375" y3="-0.95626204" z3="-0.67882753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61976511" y3="-1.9481969" z3="-1.52289872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10120188" y3="-0.99405134" z3="-1.3876705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78694207" y3="1.47797936" z3="-1.04784496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28885093" y3="0.30812492" z3="-0.50030152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66905943" y3="2.73656195" z3="-1.17467042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01166677" y3="2.73439614" z3="-0.84008057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37361204" y3="4.99027245" z3="-0.39730493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81468289" y3="3.8494377" z3="-0.92377227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74307624" y3="5.8652574" z3="-0.21096749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11733405" y3="1.61108308" z3="-1.71451327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11584346" y3="0.34967295" z3="0.19684499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7176111" y3="0.38229526" z3="-0.68570564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59822271" y3="0.73546923" z3="0.2231941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67894925" y3="-0.85667181" z3="-1.55238609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0868199" y3="-2.46404264" z3="-1.35269022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.91091361" y3="-5.49382293" z3="-6.31648285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.66563511" y3="-5.05612545" z3="-5.34455253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01828035" y3="-3.90767938" z3="-2.87712797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.63279926" y3="-3.67505097" z3="-5.20188269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.40502919" y3="-5.87918371" z3="-4.24619353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09535677" y3="-5.2989183" z3="-3.0223762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31866896" y3="-3.06933907" z3="-3.97492972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.843756" y3="-3.01051825" z3="-6.04335114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.45595164" y3="-6.96713033" z3="-4.33693965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9282454" y3="-5.92905806" z3="-2.14467185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6364461" y3="-3.35528523" z3="-1.62752832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35197004" y3="-3.836267" z3="-0.86429461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69818561" y3="-4.83995979" z3="-1.12410372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36441037" y3="-3.52918639" z3="0.58378318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35528801" y3="-3.04338406" z3="3.34115195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65169388" y3="-4.56135467" z3="1.48465214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09326153" y3="-2.24876761" z3="1.07491279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08607613" y3="-2.00777375" z3="2.44447929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63845935" y3="-4.32065119" z3="2.85756857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84637442" y3="-5.56954649" z3="1.11094725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09158987" y3="-1.40652036" z3="0.4016397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13719225" y3="-0.99524912" z3="2.79471941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83204918" y3="-5.14151264" z3="3.55000381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34027884" y3="-2.85717458" z3="4.41886941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26891436" y3="-1.73331462" z3="-3.94749115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43151014" y3="-1.32739219" z3="-3.04993705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34781576" y3="3.70481977" z3="-1.1075909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15054183" y3="-2.97519237" z3="-1.69076931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91993842" y3="-3.15479239" z3="-0.53747648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10033129" y3="-2.28119911" z3="0.39857777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83270399" y3="-0.72076347" z3="0.66431367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75882487" y3="-0.28428855" z3="-0.89525261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5215987" y3="0.48215834" z3="1.18873058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.01331419" y3="-1.05951096" z3="2.07623644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39682315" y3="-4.36709586" z3="-0.29630198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09313746" y3="-4.61037642" z3="0.91724803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0915753" y3="-0.02524395" z3="-1.73253784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39503634" y3="0.59931646" z3="-0.7065909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.41427024" y3="-1.1134147" z3="-1.21841029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64568367" y3="0.57223887" z3="0.52127293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13777552" y3="0.21156515" z3="2.18783882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99615327" y3="1.47774152" z3="1.26658702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.47066131" y3="-0.11487624" z3="2.42092415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.83182033" y3="-1.73984987" z3="1.78124094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.47976203" y3="-1.50740677" z3="2.93376805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.02947969" y3="-4.03061765" z3="0.95181177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.46743068" y3="-4.35682112" z3="1.78640328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32254346" y3="-5.68333991" z3="0.91289821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27736587" y3="-2.20063534" z3="-0.18520805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13078174" y3="-3.28850958" z3="-1.05785535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48639244" y3="-4.45099081" z3="-0.65185282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99576047" y3="-4.52084802" z3="0.64666243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14544314" y3="-3.47089167" z3="1.54776778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77847647" y3="-2.30989938" z3="1.12229426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48599737" y3="-3.20623528" z3="-2.0883061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34168671" y3="-5.28457719" z3="-1.33998593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26388791" y3="-5.71567349" z3="1.06895922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74145777" y3="-3.56245998" z3="2.55708311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87321084" y3="-1.46805883" z3="1.80979566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50192359" y3="4.02886037" z3="-0.04097141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86963566" y3="3.80403967" z3="-0.12100217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3851486" y3="3.25120205" z3="-1.28846032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57534959" y3="2.95296829" z3="-2.38188228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2085827" y3="3.17971905" z3="-2.2831333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07418262" y3="4.41390263" z3="0.88852504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5333667" y3="4.02748453" z3="0.71438831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81625683" y3="2.94384749" z3="-1.35816578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01715184" y3="2.53286645" z3="-3.28634496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44022786" y3="2.92061361" z3="-3.1202063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17608883" y3="-5.93858611" z3="2.25491828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76837137" y3="-6.41180363" z3="0.20169849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.27523375" y3="2.60661025" z3="-2.42827861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46414574" y3="3.0261547" z3="-0.33134163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65412766" y3="0.1705583" z3="-1.98035057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.97687803" y3="1.41713934" z3="-1.84450647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.84960946" y3="0.10444894" z3="-2.74806771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.34137685" y3="1.21691519" z3="-3.38455384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.36560597" y3="-0.85692154" z3="-2.83253032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.25876009" y3="1.15395246" z3="-3.97638505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49506417" y3="2.54323644" z3="-2.543702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.64508296" y3="2.44585928" z3="-3.28972376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96368869" y3="3.49555411" z3="-2.4904375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.02204295" y3="3.3247805" z3="-3.82029855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57116878" y3="3.90283008" z3="-0.22549457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74718237" y3="5.05238848" z3="-0.04627764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90998175" y3="3.95542038" z3="0.25493105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41290611" y3="5.09853126" z3="0.82845092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54240289" y3="3.0695775" z3="0.17035262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44440951" y3="5.11298479" z3="1.19155203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30070747" y3="6.22543688" z3="0.53746342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6063559" y3="6.25440545" z3="0.96032083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65947806" y3="7.10435451" z3="0.65552414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.02033044" y3="7.1600913" z3="1.41221643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38317942" y3="-3.92324311" z3="-2.8507613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55200646" y3="-4.96053091" z3="-2.5247724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2690834" y3="-3.60445012" z3="-3.43199267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52047281" y3="-3.90945284" z3="-3.53554421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72186555" y3="-1.58638266" z3="-2.0796748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46511945" y3="-1.11691817" z3="-2.74911452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5543813" y3="-0.92233066" z3="-1.21801406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77581286" y3="-1.62687879" z3="-2.64393724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.923,-.9563,-.6788;6.6198,-1.9482,-1.5229;6.1012,-.9941,-1.3877;4.7869,1.478,-1.0478;4.2889,.3081,-.5003;2.6691,2.7366,-1.1747;4.0117,2.7344,-.8401;2.3736,4.9903,-.3973;1.8147,3.8494,-.9238;1.7431,5.8653,-.211;2.1173,1.6111,-1.7145;3.1158,.3497,.1968;1.7176,.3823,-.6857;.5982,.7355,.2232;1.6789,-.8567,-1.5524;1.0868,-2.464,-1.3527;1.9109,-5.4938,-6.3165;1.6656,-5.0561,-5.3446;1.0183,-3.9077,-2.8771;1.6328,-3.6751,-5.2019;1.405,-5.8792,-4.2462;1.0954,-5.2989,-3.0224;1.3187,-3.0693,-3.9749;1.8438,-3.0105,-6.0434;1.456,-6.9671,-4.3369;.9282,-5.9291,-2.1447;.6364,-3.3553,-1.6275;-.352,-3.8363,-.8643;-.6982,-4.84,-1.1241;-.3644,-3.5292,.5838;-.3553,-3.0434,3.3412;-.6517,-4.5614,1.4847;-.0933,-2.2488,1.0749;-.0861,-2.0078,2.4445;-.6385,-4.3207,2.8576;-.8464,-5.5695,1.1109;.0916,-1.4065,.4016;.1372,-.9952,2.7947;-.832,-5.1415,3.55;-.3403,-2.8572,4.4189;1.2689,-1.7333,-3.9475;1.4315,-1.3274,-3.0499;.3478,3.7048,-1.1076;-2.1505,-2.9752,-1.6908;-2.9199,-3.1548,-.5375;-3.1003,-2.2812,.3986;-3.8327,-.7208,.6643;-4.7588,-.2843,-.8953;-2.5216,.4822,1.1887;-5.0133,-1.0595,2.0762;-3.3968,-4.3671,-.2963;-4.0931,-4.6104,.9172;-4.0916,-.0252,-1.7325;-5.395,.5993,-.7066;-5.4143,-1.1134,-1.2184;-1.6457,.5722,.5213;-2.1378,.2116,2.1878;-2.9962,1.4777,1.2666;-5.4707,-.1149,2.4209;-5.8318,-1.7398,1.7812;-4.4798,-1.5074,2.9338;-5.0295,-4.0306,.9518;-3.4674,-4.3568,1.7864;-4.3225,-5.6833,.9129;4.2774,-2.2006,-.1852;4.1308,-3.2885,-1.0579;3.4864,-4.451,-.6519;2.9958,-4.5208,.6467;3.1454,-3.4709,1.5478;3.7785,-2.3099,1.1223;4.486,-3.2062,-2.0883;3.3417,-5.2846,-1.34;2.2639,-5.7157,1.069;2.7415,-3.5625,2.5571;3.8732,-1.4681,1.8098;-.5019,4.0289,-.041;-1.8696,3.804,-.121;-2.3851,3.2512,-1.2885;-1.5753,2.953,-2.3819;-.2086,3.1797,-2.2831;-.0742,4.4139,.8885;-2.5334,4.0275,.7144;-3.8163,2.9438,-1.3582;-2.0172,2.5329,-3.2863;.4402,2.9206,-3.1202;2.1761,-5.9386,2.2549;1.7684,-6.4118,.2017;-4.2752,2.6066,-2.4283;-4.4641,3.0262,-.3313;6.6541,.1706,-1.9804;5.9769,1.4171,-1.8445;7.8496,.1044,-2.7481;8.3414,1.2169,-3.3846;8.3656,-.8569,-2.8325;9.2588,1.154,-3.9764;6.4951,2.5432,-2.5437;7.6451,2.4459,-3.2897;5.9637,3.4956,-2.4904;8.022,3.3248,-3.8203;4.5712,3.9028,-.2255;3.7472,5.0524,-.0463;5.91,3.9554,.2549;6.4129,5.0985,.8285;6.5424,3.0696,.1704;7.4444,5.113,1.1916;4.3007,6.2254,.5375;5.6064,6.2544,.9603;3.6595,7.1044,.6555;6.0203,7.1601,1.4122;-2.3832,-3.9232,-2.8508;-2.552,-4.9605,-2.5248;-3.2691,-3.6045,-3.432;-1.5205,-3.9095,-3.5355;-1.7219,-1.5864,-2.0797;-2.4651,-1.1169,-2.7491;-1.5544,-.9223,-1.218;-.7758,-1.6269,-2.6439;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662873029787</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003987724245 0.000486189245 0.020824548879 0.005335681038</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056873038 -0.001648170 0.000178113 0.000274101 0.000337931 0.000405537 0.000421361 0.000524389 0.000592737 0.000663921 0.000782367 0.000892469 0.001063893 0.001127944 0.001281283 0.001332474 0.001369742 0.001520035 0.001765488 0.001916023 0.002173470 0.002333100 0.002457656 0.003052853 0.003265643 0.003713083 0.004043713 0.004089415 0.004535057 0.004615367 0.004894407 0.005149993 0.005723439 0.005962879 0.006165131 0.006621119 0.006865371 0.007149124 0.007386402 0.008061016 0.008320229 0.008941555 0.009605121 0.009788569 0.010821063 0.011056026 0.011106128 0.011913935 0.013160895 0.013259700 0.013793189 0.014536306 0.014842019 0.015410106 0.015658023 0.016170281 0.016403235 0.016834546 0.017932229 0.018931051 0.019731789 0.020233614 0.021011695 0.021530082 0.022089019 0.022677016 0.023335530 0.023587250 0.024442766 0.025819258 0.026316319 0.026553831 0.026961081 0.027142180 0.027950153 0.028646340 0.030205767 0.030468314 0.032632192 0.032911729 0.034299965 0.035589638 0.038763019 0.039123335 0.041765965 0.045116494 0.045338270 0.045641014 0.047406020 0.048636411 0.049654693 0.050102035 0.051520023 0.051854010 0.051982039 0.052282886 0.052380469 0.052790389 0.053322280 0.055296613 0.056228020 0.056462275 0.056576500 0.056957786 0.057508514 0.058164492 0.058920199 0.059258711 0.060716068 0.061528130 0.062029605 0.063655247 0.064159411 0.064813763 0.065429979 0.066668427 0.067560983 0.068777065 0.069503972 0.071708295 0.072040209 0.072413036 0.072884428 0.075261070 0.077411107 0.080466637 0.081106704 0.083071835 0.083276294 0.086429949 0.088427262 0.089266191 0.089751941 0.091239372 0.093196522 0.094457906 0.095362223 0.095979154 0.096784362 0.097974368 0.099958916 0.100337212 0.101535679 0.102433793 0.103212355 0.103899290 0.104838396 0.107969123 0.110476317 0.111773323 0.112041030 0.113119572 0.114138932 0.116054309 0.116687403 0.117302554 0.118431356 0.121668151 0.124336129 0.125050268 0.128079731 0.128444380 0.129756545 0.133186425 0.135901653 0.137122887 0.138226819 0.138505839 0.139759848 0.141651487 0.143420210 0.145527853 0.146135241 0.151612094 0.153146313 0.153280809 0.159916606 0.160819111 0.168243757 0.171164347 0.174907878 0.178687439 0.181245883 0.183789653 0.188287350 0.188714544 0.191129168 0.200486530 0.201953233 0.205686129 0.206625740 0.207186596 0.209653693 0.211791341 0.212500498 0.213428519 0.216455144 0.218237928 0.220538163 0.223807191 0.225367141 0.231748110 0.233205397 0.234592693 0.238302117 0.245058770 0.247144440 0.250182109 0.255567491 0.256492211 0.257146308 0.262180267 0.271463132 0.282623749 0.291647593 0.299319795 0.299851279 0.300697819 0.306948498 0.307678826 0.309593103 0.318420657 0.321096821 0.326179961 0.328149332 0.335209281 0.347262071 0.351303538 0.355548394 0.359263334 0.360170944 0.364002709 0.383886174 0.406547691 0.411771385 0.430058378 0.431668610 0.433213204 0.448631571 0.464134307 0.472165963 0.473563934 0.477947804 0.486207758 0.498275427 0.502321325 0.513773640 0.516173403 0.543157479 0.565591801 0.567261421 0.584539284 0.591775706 0.605604285 0.642598156 0.645038576 0.665765187 0.675281111 0.685474686 0.692238509 0.700852983 0.702712608 0.704252826 0.716933507 0.731180165 0.736676880 0.737961388 0.747111122 0.750738346 0.771601231 0.775949072 0.807288940 0.818779875 0.821572058 0.827915530 0.833772087 0.846146689 0.847204612 0.848662406 0.853412956 0.859906147 0.867383360 0.874886549 0.881046362 0.887100789 0.889278698 0.892270097 0.900772918 0.908143997 0.915435257 0.917599106 0.924386301 0.931638614 0.934566308 0.953306019 0.956525702 0.961441487 0.969540102 0.975153766 0.982153035 0.998501710 1.004289494 1.013104312 1.018775906 1.038971131 1.049698590 1.055404684 1.069041971 1.076737712 1.087033571 1.103226049 1.110240211 1.111574000 1.117829606 1.122496305 1.123499479 1.134986913 1.147180374 1.161513763 1.169933834 1.176495241 1.179818668 1.200561313 1.219340459 1.231063125 1.247860478 1.296021783 1.296299472 1.314565372 1.326252909 1.326616775 1.329844192 1.330194282 1.334633004 1.341298289 1.347544257 1.363022507 1.378847514 1.380940168 1.381538323 1.426317937 1.509616054 1.557868744 1.672626544 1.918059919</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">147</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92568478" y3="-0.95628489" z3="-0.67681753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.62406505" y3="-1.94757647" z3="-1.5184583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10519605" y3="-0.99355152" z3="-1.38351875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78969435" y3="1.47811769" z3="-1.04492332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29098619" y3="0.30786487" z3="-0.49874574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67130986" y3="2.7350357" z3="-1.17702301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01309962" y3="2.73401671" z3="-0.83913532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37258985" y3="4.98917716" z3="-0.40241645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81553305" y3="3.84753137" z3="-0.92886386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74121138" y3="5.86395411" z3="-0.21885232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12171283" y3="1.60884923" z3="-1.71754346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11669943" y3="0.34856395" z3="0.19625829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71987444" y3="0.38085646" z3="-0.68866547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.59923957" y3="0.73526849" z3="0.21820378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68242901" y3="-0.85874943" z3="-1.5544946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08511977" y3="-2.46480774" z3="-1.35472536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.89917453" y3="-5.49244263" z3="-6.32139546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.65606878" y3="-5.0550978" z3="-5.34882542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01419665" y3="-3.90765731" z3="-2.87962782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.62444156" y3="-3.67411603" z3="-5.20534276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.3971195" y3="-5.8785654" z3="-4.25045745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09025679" y3="-5.29880908" z3="-3.02578789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31302221" y3="-3.06888045" z3="-3.97752911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83429878" y3="-3.00933325" z3="-6.04684064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.44717619" y3="-6.96646799" z3="-4.34185141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92442237" y3="-5.92922145" z3="-2.14807626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63455319" y3="-3.35646177" z3="-1.62884455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35441188" y3="-3.83562426" z3="-0.8664266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70166612" y3="-4.8392789" z3="-1.12602226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36655971" y3="-3.52808307" z3="0.58157197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35685525" y3="-3.03938825" z3="3.33848763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65076689" y3="-4.56158954" z3="1.48389693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09686695" y3="-2.24595993" z3="1.07157361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08921009" y3="-2.00398172" z3="2.4410445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63669963" y3="-4.31973891" z3="2.85669802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.83875957" y3="-5.57564933" z3="1.11357968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10074364" y3="-1.41057037" z3="0.40481972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13810092" y3="-0.9946127" z3="2.7920858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.819893" y3="-5.14504701" z3="3.55417132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3377142" y3="-2.85415897" z3="4.41677406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26405069" y3="-1.73283863" z3="-3.94922344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43010692" y3="-1.3278062" z3="-3.05206302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34915364" y3="3.70128371" z3="-1.11465676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15238645" y3="-2.97198628" z3="-1.68984985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92066121" y3="-3.15374788" z3="-0.53534149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09838222" y3="-2.28276896" z3="0.40319865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83129498" y3="-0.72103655" z3="0.67016772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.76710044" y3="-0.2889093" z3="-0.8838163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51900532" y3="0.4847623" z3="1.18675818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.00237857" y3="-1.06013916" z3="2.09002632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39805224" y3="-4.36646023" z3="-0.29524207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09401281" y3="-4.61005902" z3="0.91769108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.1048533" y3="-0.03627067" z3="-1.726992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3993209" y3="0.59825953" z3="-0.69589878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.42742271" y3="-1.11742325" z3="-1.19758574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64459581" y3="0.57503908" z3="0.5161313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13057714" y3="0.21701077" z3="2.18470743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99460706" y3="1.48010914" z3="1.26403648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.45847884" y3="-0.11443781" z3="2.43614736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.82207941" y3="-1.74126868" z3="1.80196871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.46222902" y3="-1.50681549" z3="2.94339722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03197421" y3="-4.03126924" z3="0.95029304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4687533" y3="-4.35421597" z3="1.78767398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32078619" y3="-5.6854917" z3="0.91486351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27884529" y3="-2.20074458" z3="-0.18503771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13048485" y3="-3.28694331" z3="-1.05939747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48428064" y3="-4.44893773" z3="-0.6551327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99426847" y3="-4.52032805" z3="0.64357134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14572294" y3="-3.47203261" z3="1.54630154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77994031" y3="-2.31110041" z3="1.12233717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48584948" y3="-3.20355945" z3="-2.08972031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33795647" y3="-5.28096366" z3="-1.34459996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26251489" y3="-5.71559256" z3="1.06503866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74228928" y3="-3.56492469" z3="2.55573153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87575276" y3="-1.4701311" z3="1.8108689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50294884" y3="4.02887638" z3="-0.05145995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87058845" y3="3.80328608" z3="-0.13363647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38381696" y3="3.24504194" z3="-1.29936624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57142793" y3="2.9427565" z3="-2.38886089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20523102" y3="3.17197171" z3="-2.28946422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07810464" y3="4.4196904" z3="0.87580939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53517764" y3="4.02840705" z3="0.70144298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81387036" y3="2.93433466" z3="-1.36849465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01091872" y3="2.5183424" z3="-3.2921963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44354294" y3="2.91388934" z3="-3.1289367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18143119" y3="-5.94468153" z3="2.2517537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76120871" y3="-6.40626743" z3="0.19658961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.27056959" y3="2.59043053" z3="-2.43759518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46362266" y3="3.02141285" z3="-0.34342386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65902953" y3="0.17156473" z3="-1.9744477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98123832" y3="1.41794604" z3="-1.83926151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.85595186" y3="0.10611678" z3="-2.73996994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.34863859" y3="1.21897885" z3="-3.3750646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3723319" y3="-0.85508674" z3="-2.82390458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.26713206" y3="1.15649798" z3="-3.96522688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50045399" y3="2.54447239" z3="-2.53702994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.65186602" y3="2.44769814" z3="-3.28099352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96874673" y3="3.49664453" z3="-2.48439854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.02955742" y3="3.32692669" z3="-3.81054103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57022424" y3="3.90310196" z3="-0.22377076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74517074" y3="5.05232908" z3="-0.0477095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9075912" y3="3.95663561" z3="0.2605844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40825126" y3="5.1002071" z3="0.83508864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54063399" y3="3.07107064" z3="0.17831122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43862379" y3="5.11533121" z3="1.20143646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29642717" y3="6.22593424" z3="0.53701542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60075835" y3="6.2557084" z3="0.96395017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65444437" y3="7.10460655" z3="0.65279251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.01293227" y3="7.1617466" z3="1.41673698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38717884" y3="-3.91470248" z3="-2.85260151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56512129" y3="-4.95050299" z3="-2.52920571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26667754" y3="-3.58681743" z3="-3.43512725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52270516" y3="-3.90774167" z3="-3.53510327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72302506" y3="-1.58270716" z3="-2.07685383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46677866" y3="-1.1117939" z3="-2.74553994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55386119" y3="-0.91929111" z3="-1.21464875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7787803" y3="-1.62348936" z3="-2.64302428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9257,-.9563,-.6768;6.6241,-1.9476,-1.5185;6.1052,-.9936,-1.3835;4.7897,1.4781,-1.0449;4.291,.3079,-.4987;2.6713,2.735,-1.177;4.0131,2.734,-.8391;2.3726,4.9892,-.4024;1.8155,3.8475,-.9289;1.7412,5.864,-.2189;2.1217,1.6088,-1.7175;3.1167,.3486,.1963;1.7199,.3809,-.6887;.5992,.7353,.2182;1.6824,-.8587,-1.5545;1.0851,-2.4648,-1.3547;1.8992,-5.4924,-6.3214;1.6561,-5.0551,-5.3488;1.0142,-3.9077,-2.8796;1.6244,-3.6741,-5.2053;1.3971,-5.8786,-4.2505;1.0903,-5.2988,-3.0258;1.313,-3.0689,-3.9775;1.8343,-3.0093,-6.0468;1.4472,-6.9665,-4.3419;.9244,-5.9292,-2.1481;.6346,-3.3565,-1.6288;-.3544,-3.8356,-.8664;-.7017,-4.8393,-1.126;-.3666,-3.5281,.5816;-.3569,-3.0394,3.3385;-.6508,-4.5616,1.4839;-.0969,-2.246,1.0716;-.0892,-2.004,2.441;-.6367,-4.3197,2.8567;-.8388,-5.5756,1.1136;.1007,-1.4106,.4048;.1381,-.9946,2.7921;-.8199,-5.145,3.5542;-.3377,-2.8542,4.4168;1.2641,-1.7328,-3.9492;1.4301,-1.3278,-3.0521;.3492,3.7013,-1.1147;-2.1524,-2.972,-1.6898;-2.9207,-3.1537,-.5353;-3.0984,-2.2828,.4032;-3.8313,-.721,.6702;-4.7671,-.2889,-.8838;-2.519,.4848,1.1868;-5.0024,-1.0601,2.09;-3.3981,-4.3665,-.2952;-4.094,-4.6101,.9177;-4.1049,-.0363,-1.727;-5.3993,.5983,-.6959;-5.4274,-1.1174,-1.1976;-1.6446,.575,.5161;-2.1306,.217,2.1847;-2.9946,1.4801,1.264;-5.4585,-.1144,2.4361;-5.8221,-1.7413,1.802;-4.4622,-1.5068,2.9434;-5.032,-4.0313,.9503;-3.4688,-4.3542,1.7877;-4.3208,-5.6855,.9149;4.2788,-2.2007,-.185;4.1305,-3.2869,-1.0594;3.4843,-4.4489,-.6551;2.9943,-4.5203,.6436;3.1457,-3.472,1.5463;3.7799,-2.3111,1.1223;4.4858,-3.2036,-2.0897;3.338,-5.281,-1.3446;2.2625,-5.7156,1.065;2.7423,-3.5649,2.5557;3.8758,-1.4701,1.8109;-.5029,4.0289,-.0515;-1.8706,3.8033,-.1336;-2.3838,3.245,-1.2994;-1.5714,2.9428,-2.3889;-.2052,3.172,-2.2895;-.0781,4.4197,.8758;-2.5352,4.0284,.7014;-3.8139,2.9343,-1.3685;-2.0109,2.5183,-3.2922;.4435,2.9139,-3.1289;2.1814,-5.9447,2.2518;1.7612,-6.4063,.1966;-4.2706,2.5904,-2.4376;-4.4636,3.0214,-.3434;6.659,.1716,-1.9744;5.9812,1.4179,-1.8393;7.856,.1061,-2.74;8.3486,1.219,-3.3751;8.3723,-.8551,-2.8239;9.2671,1.1565,-3.9652;6.5005,2.5445,-2.537;7.6519,2.4477,-3.281;5.9687,3.4966,-2.4844;8.0296,3.3269,-3.8105;4.5702,3.9031,-.2238;3.7452,5.0523,-.0477;5.9076,3.9566,.2606;6.4083,5.1002,.8351;6.5406,3.0711,.1783;7.4386,5.1153,1.2014;4.2964,6.2259,.537;5.6008,6.2557,.964;3.6544,7.1046,.6528;6.0129,7.1617,1.4167;-2.3872,-3.9147,-2.8526;-2.5651,-4.9505,-2.5292;-3.2667,-3.5868,-3.4351;-1.5227,-3.9077,-3.5351;-1.723,-1.5827,-2.0769;-2.4668,-1.1118,-2.7455;-1.5539,-.9193,-1.2146;-.7788,-1.6235,-2.643;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662851070038</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004835109422 0.000610092777 0.021367109106 0.005336660410</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056874096 -0.002327438 0.000179716 0.000274288 0.000338235 0.000405145 0.000425012 0.000526252 0.000598421 0.000666554 0.000783419 0.000892743 0.001063414 0.001129805 0.001281324 0.001332623 0.001373170 0.001520202 0.001774806 0.001964561 0.002249472 0.002364763 0.002481404 0.003066612 0.003272845 0.003720819 0.004064089 0.004182059 0.004585212 0.004626653 0.004894395 0.005149359 0.005816341 0.005966288 0.006196424 0.006647596 0.006901951 0.007173308 0.007390241 0.008071226 0.008342265 0.009016436 0.009609543 0.009855299 0.010868546 0.011093978 0.011107737 0.011956433 0.013161898 0.013264193 0.013801329 0.014540059 0.014844615 0.015421432 0.015658656 0.016219700 0.016403080 0.016835552 0.017935301 0.018930735 0.019749443 0.020233890 0.021011509 0.021530892 0.022095391 0.022679803 0.023337850 0.023586290 0.024442619 0.025820378 0.026316162 0.026559928 0.026961349 0.027159446 0.027952731 0.028665290 0.030207644 0.030472556 0.032645555 0.032924612 0.034302721 0.035621253 0.038770016 0.039124450 0.041774773 0.045337598 0.045370314 0.045655551 0.048059639 0.048701036 0.049659979 0.050112742 0.051521297 0.051861859 0.051992299 0.052282914 0.052380572 0.052791988 0.053325282 0.055303532 0.056242621 0.056476009 0.056585070 0.056958733 0.057527853 0.058218947 0.059004647 0.059283952 0.060746040 0.061636516 0.062030113 0.063653251 0.064164324 0.064813891 0.065431400 0.066690978 0.067610825 0.068784354 0.069554215 0.071750953 0.072053492 0.072416912 0.072884659 0.075261297 0.077699676 0.080467172 0.081108815 0.083076492 0.083277133 0.086436008 0.088470993 0.089267038 0.089754551 0.091239629 0.093198141 0.094457957 0.095362292 0.096015085 0.096785062 0.097996631 0.099960035 0.100338440 0.101762503 0.102458691 0.103211583 0.103899347 0.104877413 0.107988576 0.110506873 0.111796098 0.112097356 0.113124717 0.114171752 0.116059535 0.116691612 0.117303535 0.118432813 0.121673702 0.124336614 0.125056188 0.128083405 0.128448757 0.129756172 0.133186155 0.135904572 0.137173808 0.138234615 0.138507795 0.139760029 0.141651405 0.143419911 0.145527864 0.146137077 0.151612885 0.153152327 0.153281834 0.159916779 0.160819366 0.168260451 0.171168674 0.174922548 0.178688818 0.181246341 0.183799086 0.188310648 0.188724144 0.191127591 0.200487054 0.201978014 0.205749035 0.206625742 0.207187353 0.209831015 0.211808422 0.212507113 0.213428393 0.216464128 0.218239914 0.220541722 0.223814983 0.225370439 0.231752191 0.233215327 0.234593387 0.238303375 0.245060087 0.247144903 0.250287222 0.255792453 0.256499036 0.257146312 0.262208135 0.271474701 0.282623746 0.291648191 0.299336035 0.299852107 0.300702843 0.306953272 0.307692169 0.309593198 0.318420777 0.321097077 0.326180054 0.328400553 0.335212224 0.347269015 0.351303399 0.355550019 0.359339970 0.360285570 0.364003119 0.383886529 0.406561280 0.411774178 0.430075834 0.431667690 0.433441687 0.448754917 0.464140697 0.473221503 0.474730750 0.477956832 0.486209952 0.498395001 0.502320387 0.513774243 0.516205543 0.543169939 0.565619520 0.567263710 0.584664157 0.591782386 0.605607301 0.642596994 0.645039490 0.665778712 0.675294383 0.685475119 0.692337820 0.700884118 0.702840102 0.704254993 0.716934581 0.731277126 0.736766154 0.737964267 0.747113538 0.750739149 0.771601444 0.775949129 0.807292194 0.818875535 0.821573569 0.827915828 0.833774363 0.846208603 0.847224046 0.848761993 0.853417861 0.859908035 0.867384028 0.874889852 0.881082864 0.887143065 0.889333783 0.892270059 0.900773658 0.908164243 0.915437007 0.917600702 0.924386323 0.931639320 0.934587535 0.953383640 0.956526428 0.961553638 0.969540742 0.975158906 0.982153057 0.998502027 1.004295232 1.013272438 1.018833066 1.039002534 1.049811239 1.055406601 1.069075015 1.076758020 1.087034501 1.103236711 1.110240225 1.111575167 1.117837849 1.122496566 1.123500115 1.134997042 1.147468029 1.161539597 1.169937829 1.176502101 1.181290331 1.200561736 1.219635852 1.231070116 1.248041842 1.296134535 1.296299824 1.314570197 1.326254655 1.326619139 1.329845221 1.330207982 1.334634225 1.341317986 1.347548990 1.363317049 1.378860162 1.380942525 1.381538350 1.426324130 1.509626139 1.557870346 1.672882805 1.918084749</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">148</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92833618" y3="-0.95601944" z3="-0.67469221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.62827393" y3="-1.94680813" z3="-1.51374213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10912802" y3="-0.99286213" z3="-1.3792351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79216145" y3="1.47839466" z3="-1.04247874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29307455" y3="0.30790612" z3="-0.49725487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67310314" y3="2.73385827" z3="-1.1800171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0141125" y3="2.73383509" z3="-0.83889675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37129896" y3="4.98864959" z3="-0.4082748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81613316" y3="3.84620733" z3="-0.93534811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73899516" y3="5.86342641" z3="-0.22667195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12541884" y3="1.60678482" z3="-1.72038106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11768157" y3="0.34807561" z3="0.19595018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72236832" y3="0.37947763" z3="-0.69108256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60024595" y3="0.73432306" z3="0.21384792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68634863" y3="-0.86042706" z3="-1.55644384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08642962" y3="-2.46546147" z3="-1.35677799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.88818961" y3="-5.49069887" z3="-6.32671453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.64703915" y3="-5.05362017" z3="-5.35352367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01015695" y3="-3.90682156" z3="-2.88275379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6169962" y3="-3.67261353" z3="-5.20930661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38895677" y3="-5.87740047" z3="-4.2551925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.08453835" y3="-5.29799446" z3="-3.02966189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30803632" y3="-3.0678732" z3="-3.98071049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.82612753" y3="-3.00754327" z3="-6.0507608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.43777556" y3="-6.96531285" z3="-4.34735433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91914753" y3="-5.92865206" z3="-2.15207892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63306521" y3="-3.35495932" z3="-1.63161242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35642521" y3="-3.83239599" z3="-0.86740734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70489064" y3="-4.83579206" z3="-1.12660591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36347445" y3="-3.52799917" z3="0.58155727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35360609" y3="-3.04304155" z3="3.33831594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65062916" y3="-4.5603823" z3="1.48163832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0894414" y3="-2.2489809" z3="1.07345921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.0819761" y3="-2.00835234" z3="2.44284735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63718628" y3="-4.31979988" z3="2.85428171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84541507" y3="-5.56836465" z3="1.10775597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0952349" y3="-1.4060737" z3="0.40003922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14206324" y3="-0.99620015" z3="2.79346229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8312526" y3="-5.14053132" z3="3.54577902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33922286" y3="-2.85645959" z3="4.41575983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26002949" y3="-1.7317431" z3="-3.95113343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42880303" y3="-1.32793854" z3="-3.05396811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35015878" y3="3.69890923" z3="-1.12390291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15168825" y3="-2.96779467" z3="-1.68706575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91912092" y3="-3.15139712" z3="-0.53204863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09664748" y3="-2.28128889" z3="0.4074509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82927806" y3="-0.72092218" z3="0.67825147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.773946" y3="-0.29317587" z3="-0.8726285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5169093" y3="0.48807142" z3="1.18486139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.99133039" y3="-1.05938145" z3="2.10588883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39593711" y3="-4.36461129" z3="-0.2940113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09430815" y3="-4.61011433" z3="0.91693657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.11611022" y3="-0.04809872" z3="-1.72166882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40045335" y3="0.59780863" z3="-0.68558636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.44031963" y3="-1.12067669" z3="-1.17828233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64657317" y3="0.57687018" z3="0.50998422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1235378" y3="0.22420606" z3="2.18230263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99428724" y3="1.48248973" z3="1.26191318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.44650283" y3="-0.1151326" z3="2.45509326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.81185309" y3="-1.74240665" z3="1.82333582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.44502775" y3="-1.50468354" z3="2.95716351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03277665" y3="-4.03217717" z3="0.94763331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4721796" y3="-4.35518848" z3="1.7885773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32041544" y3="-5.68454331" z3="0.91092745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2805968" y3="-2.20074346" z3="-0.1846879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13070848" y3="-3.28531012" z3="-1.06083122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48366421" y3="-4.44753189" z3="-0.65806854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99484838" y3="-4.52086732" z3="0.64098658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14733945" y3="-3.47391848" z3="1.54524711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78211171" y3="-2.31267009" z3="1.12266311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48532962" y3="-3.20028107" z3="-2.09126172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3353665" y3="-5.27802542" z3="-1.34898869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26118856" y3="-5.71546985" z3="1.06020013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74394139" y3="-3.5677655" z3="2.55459818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87859435" y3="-1.47253352" z3="1.81220515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50345881" y3="4.02857024" z3="-0.06191867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87047104" y3="3.80061531" z3="-0.1444233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38130216" y3="3.23702932" z3="-1.30844057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56795735" y3="2.93363471" z3="-2.39783539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20222819" y3="3.16566008" z3="-2.29792184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07948934" y3="4.42142809" z3="0.86585544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53702617" y3="4.02908437" z3="0.68723275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81101239" y3="2.92399846" z3="-1.37857477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.00611014" y3="2.505402" z3="-3.30012812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44846974" y3="2.90423753" z3="-3.13304645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1754261" y3="-5.94283323" z3="2.24521935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76145821" y3="-6.40636639" z3="0.19120005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2656969" y3="2.57291668" z3="-2.44597289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46218055" y3="3.01590879" z3="-0.3546799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66392049" y3="0.17266696" z3="-1.96848292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98545974" y3="1.41881384" z3="-1.83429505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.86248526" y3="0.10782233" z3="-2.73148659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.35624691" y3="1.22104823" z3="-3.36511655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.37930915" y3="-0.85321297" z3="-2.81467505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2759941" y3="1.15902014" z3="-3.95337512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50593001" y3="2.54572753" z3="-2.53050986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.65896882" y3="2.44955423" z3="-3.27202462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97395342" y3="3.49779197" z3="-2.47862492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.03756317" y3="3.32912719" z3="-3.8003655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56895779" y3="3.90363249" z3="-0.2228371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74281889" y3="5.05266771" z3="-0.04975349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90497688" y3="3.95797371" z3="0.26518198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40346033" y3="5.10211494" z3="0.84048006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53865336" y3="3.07250655" z3="0.18507401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43284351" y3="5.11781988" z3="1.20968751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29182143" y3="6.22691352" z3="0.53594627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59495673" y3="6.25742902" z3="0.96653702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64905834" y3="7.10542763" z3="0.64949046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.00540339" y3="7.16392436" z3="1.42002653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39010727" y3="-3.91192154" z3="-2.85011935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56010051" y3="-4.95116822" z3="-2.52290862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27843962" y3="-3.59133864" z3="-3.43124865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52838467" y3="-3.89873504" z3="-3.53636605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72445445" y3="-1.57697746" z3="-2.07478216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46988943" y3="-1.10532505" z3="-2.74001955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55251887" y3="-0.9135788" z3="-1.21288664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7810404" y3="-1.61780486" z3="-2.64295069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9283,-.956,-.6747;6.6283,-1.9468,-1.5137;6.1091,-.9929,-1.3792;4.7922,1.4784,-1.0425;4.2931,.3079,-.4973;2.6731,2.7339,-1.18;4.0141,2.7338,-.8389;2.3713,4.9886,-.4083;1.8161,3.8462,-.9353;1.739,5.8634,-.2267;2.1254,1.6068,-1.7204;3.1177,.3481,.196;1.7224,.3795,-.6911;.6002,.7343,.2138;1.6863,-.8604,-1.5564;1.0864,-2.4655,-1.3568;1.8882,-5.4907,-6.3267;1.647,-5.0536,-5.3535;1.0102,-3.9068,-2.8828;1.617,-3.6726,-5.2093;1.389,-5.8774,-4.2552;1.0845,-5.298,-3.0297;1.308,-3.0679,-3.9807;1.8261,-3.0075,-6.0508;1.4378,-6.9653,-4.3474;.9191,-5.9287,-2.1521;.6331,-3.355,-1.6316;-.3564,-3.8324,-.8674;-.7049,-4.8358,-1.1266;-.3635,-3.528,.5816;-.3536,-3.043,3.3383;-.6506,-4.5604,1.4816;-.0894,-2.249,1.0735;-.082,-2.0084,2.4428;-.6372,-4.3198,2.8543;-.8454,-5.5684,1.1078;.0952,-1.4061,.4;.1421,-.9962,2.7935;-.8313,-5.1405,3.5458;-.3392,-2.8565,4.4158;1.26,-1.7317,-3.9511;1.4288,-1.3279,-3.054;.3502,3.6989,-1.1239;-2.1517,-2.9678,-1.6871;-2.9191,-3.1514,-.532;-3.0966,-2.2813,.4075;-3.8293,-.7209,.6783;-4.7739,-.2932,-.8726;-2.5169,.4881,1.1849;-4.9913,-1.0594,2.1059;-3.3959,-4.3646,-.294;-4.0943,-4.6101,.9169;-4.1161,-.0481,-1.7217;-5.4005,.5978,-.6856;-5.4403,-1.1207,-1.1783;-1.6466,.5769,.51;-2.1235,.2242,2.1823;-2.9943,1.4825,1.2619;-5.4465,-.1151,2.4551;-5.8119,-1.7424,1.8233;-4.445,-1.5047,2.9572;-5.0328,-4.0322,.9476;-3.4722,-4.3552,1.7886;-4.3204,-5.6845,.9109;4.2806,-2.2007,-.1847;4.1307,-3.2853,-1.0608;3.4837,-4.4475,-.6581;2.9948,-4.5209,.641;3.1473,-3.4739,1.5452;3.7821,-2.3127,1.1227;4.4853,-3.2003,-2.0913;3.3354,-5.278,-1.349;2.2612,-5.7155,1.0602;2.7439,-3.5678,2.5546;3.8786,-1.4725,1.8122;-.5035,4.0286,-.0619;-1.8705,3.8006,-.1444;-2.3813,3.237,-1.3084;-1.568,2.9336,-2.3978;-.2022,3.1657,-2.2979;-.0795,4.4214,.8659;-2.537,4.0291,.6872;-3.811,2.924,-1.3786;-2.0061,2.5054,-3.3001;.4485,2.9042,-3.133;2.1754,-5.9428,2.2452;1.7615,-6.4064,.1912;-4.2657,2.5729,-2.446;-4.4622,3.0159,-.3547;6.6639,.1727,-1.9685;5.9855,1.4188,-1.8343;7.8625,.1078,-2.7315;8.3562,1.221,-3.3651;8.3793,-.8532,-2.8147;9.276,1.159,-3.9534;6.5059,2.5457,-2.5305;7.659,2.4496,-3.272;5.974,3.4978,-2.4786;8.0376,3.3291,-3.8004;4.569,3.9036,-.2228;3.7428,5.0527,-.0498;5.905,3.958,.2652;6.4035,5.1021,.8405;6.5387,3.0725,.1851;7.4328,5.1178,1.2097;4.2918,6.2269,.5359;5.595,6.2574,.9665;3.6491,7.1054,.6495;6.0054,7.1639,1.42;-2.3901,-3.9119,-2.8501;-2.5601,-4.9512,-2.5229;-3.2784,-3.5913,-3.4312;-1.5284,-3.8987,-3.5364;-1.7245,-1.577,-2.0748;-2.4699,-1.1053,-2.74;-1.5525,-.9136,-1.2129;-.781,-1.6178,-2.643;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662840695988</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004986044830 0.000619473008 0.022442769424 0.005338378131</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056875903 -0.002080553 0.000178593 0.000274565 0.000338745 0.000405000 0.000425310 0.000525982 0.000599198 0.000667610 0.000784008 0.000892869 0.001063382 0.001131780 0.001282105 0.001332996 0.001373146 0.001520242 0.001781195 0.001983810 0.002267752 0.002393544 0.002492914 0.003075123 0.003287817 0.003730443 0.004064074 0.004305823 0.004583510 0.004623725 0.004897750 0.005157711 0.005841509 0.005970419 0.006192495 0.006652099 0.006907884 0.007178904 0.007389877 0.008088019 0.008347965 0.009093346 0.009615067 0.009870428 0.010883012 0.011106628 0.011227574 0.011990838 0.013171005 0.013277431 0.013813401 0.014541294 0.014853119 0.015428017 0.015664142 0.016278389 0.016403885 0.016835630 0.017935442 0.018960956 0.019773037 0.020234712 0.021013759 0.021536822 0.022095427 0.022679630 0.023339399 0.023587125 0.024443128 0.025820742 0.026316292 0.026563356 0.026961720 0.027162629 0.027954079 0.028682033 0.030208045 0.030481246 0.032645968 0.032924944 0.034302876 0.035645512 0.038770727 0.039127553 0.041790307 0.045338677 0.045458819 0.045742500 0.048410171 0.048972180 0.049668528 0.050123726 0.051522874 0.051861790 0.052005945 0.052282952 0.052380902 0.052792127 0.053332297 0.055307156 0.056258812 0.056492768 0.056593596 0.056960357 0.057545637 0.058266158 0.059103024 0.059362510 0.060757903 0.061777945 0.062084516 0.063693189 0.064177598 0.064814414 0.065438670 0.066733966 0.067647783 0.068801526 0.069627391 0.071770608 0.072057819 0.072416466 0.072884812 0.075263910 0.077902124 0.080477491 0.081140830 0.083076690 0.083280463 0.086445076 0.088484768 0.089269653 0.089756997 0.091239866 0.093199112 0.094458049 0.095362415 0.096037791 0.096786419 0.098000497 0.099960984 0.100338563 0.102032010 0.102525518 0.103246838 0.103909699 0.104923246 0.107997344 0.110538337 0.111804627 0.112203017 0.113124896 0.114202243 0.116058740 0.116703930 0.117351238 0.118434817 0.121677529 0.124337185 0.125058002 0.128090915 0.128471802 0.129769121 0.133186249 0.135906570 0.137206591 0.138247099 0.138508163 0.139763151 0.141653254 0.143421248 0.145529177 0.146138811 0.151613135 0.153153900 0.153286581 0.159919913 0.160819728 0.168258879 0.171174640 0.174993335 0.178689210 0.181246849 0.183812085 0.188338514 0.188743792 0.191128836 0.200519427 0.202007630 0.205804514 0.206625879 0.207187948 0.210011641 0.211830875 0.212509890 0.213428592 0.216477307 0.218240564 0.220543157 0.223817217 0.225372775 0.231760370 0.233228956 0.234594333 0.238305050 0.245080211 0.247154831 0.250521850 0.256107603 0.256521635 0.257147140 0.262227055 0.271492424 0.282624909 0.291648858 0.299401816 0.299853149 0.300704560 0.306955296 0.307712064 0.309593212 0.318420957 0.321098011 0.326180157 0.328739979 0.335218983 0.347271748 0.351308905 0.355550869 0.359401715 0.360423105 0.364005540 0.383886817 0.406566977 0.411774226 0.430101656 0.431667520 0.433942800 0.448788146 0.464144630 0.473329572 0.477059339 0.477983811 0.486212790 0.498574493 0.502330977 0.513774806 0.516246323 0.543181419 0.565646952 0.567265300 0.584845910 0.591792679 0.605612122 0.642648233 0.645039515 0.665782354 0.675315116 0.685478560 0.692495911 0.700892433 0.702854175 0.704255353 0.716937344 0.731392663 0.736803598 0.737967604 0.747113816 0.750740279 0.771601606 0.775949134 0.807320572 0.819082987 0.821577017 0.827922244 0.833774514 0.846216008 0.847225235 0.849076110 0.853439672 0.859935617 0.867384196 0.874891595 0.881096750 0.887207327 0.889436527 0.892277050 0.900773727 0.908274242 0.915444577 0.917609756 0.924386695 0.931642810 0.934592396 0.953526386 0.956534166 0.961705770 0.969559460 0.975159491 0.982153133 0.998502138 1.004317237 1.013474159 1.018918194 1.039074953 1.050006263 1.055408059 1.069147736 1.076921021 1.087034693 1.103244713 1.110240354 1.111577769 1.117849229 1.122496719 1.123500454 1.135023686 1.147741849 1.161577537 1.169941140 1.176504129 1.183113557 1.200562414 1.219983669 1.231070934 1.248224841 1.296195551 1.296300239 1.314572931 1.326257333 1.326619387 1.329845473 1.330214650 1.334634378 1.341336064 1.347552165 1.363475872 1.378871211 1.380944095 1.381538996 1.426332374 1.509634673 1.557871209 1.673129504 1.918090669</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">149</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93120705" y3="-0.95572873" z3="-0.67264013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63282617" y3="-1.94599774" z3="-1.50870171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11338397" y3="-0.99213647" z3="-1.37477909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79493843" y3="1.47869874" z3="-1.0401125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.295226" y3="0.30790934" z3="-0.49602175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6753977" y3="2.73250373" z3="-1.18293639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0156204" y3="2.73369476" z3="-0.83876724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37020248" y3="4.98782417" z3="-0.41419636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81691401" y3="3.84437243" z3="-0.94087058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73694906" y3="5.86232617" z3="-0.23523316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12980556" y3="1.60456546" z3="-1.7238103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11856609" y3="0.3471993" z3="0.19502993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72461105" y3="0.3781805" z3="-0.69428336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60128419" y3="0.73387419" z3="0.20872362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68982641" y3="-0.86236248" z3="-1.55893734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08543884" y3="-2.4652069" z3="-1.35873548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87653711" y3="-5.488974" z3="-6.33181515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63760699" y3="-5.05208078" z3="-5.35795894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00618292" y3="-3.90580427" z3="-2.88548073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60928324" y3="-3.67111338" z3="-5.21304251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38069049" y3="-5.87613121" z3="-4.25948268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07905413" y3="-5.29697771" z3="-3.03313307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30311137" y3="-3.06655611" z3="-3.9835546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81766641" y3="-3.00590919" z3="-6.05464424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.42815811" y3="-6.9640707" z3="-4.35218005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91460166" y3="-5.92794837" z3="-2.15553784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63074795" y3="-3.35451208" z3="-1.63339676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35705524" y3="-3.83340949" z3="-0.86844681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70686935" y3="-4.83593003" z3="-1.128166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.366081" y3="-3.52609865" z3="0.57957109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35299902" y3="-3.04104946" z3="3.33727808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65389459" y3="-4.55860213" z3="1.48081576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09310981" y3="-2.24498587" z3="1.07043145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08372168" y3="-2.00500294" z3="2.44028612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63850654" y3="-4.31859979" z3="2.85382067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84760251" y3="-5.56948911" z3="1.10837974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10378942" y3="-1.40834046" z3="0.40394423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14604183" y3="-0.99659569" z3="2.79229923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8265606" y3="-5.14271048" z3="3.54975708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33323733" y3="-2.8572705" z3="4.41574328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25659066" y3="-1.73039387" z3="-3.95345621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42749249" y3="-1.3272143" z3="-3.0562131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35138397" y3="3.69521483" z3="-1.1310019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1553871" y3="-2.96545823" z3="-1.6869271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92185299" y3="-3.14939504" z3="-0.5322052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.096346" y3="-2.28149957" z3="0.41006047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82808372" y3="-0.72182816" z3="0.68453823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.78242788" y3="-0.29822448" z3="-0.86057143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51428664" y3="0.49018037" z3="1.18323635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.97941891" y3="-1.06119456" z3="2.12028803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40130318" y3="-4.361761" z3="-0.29669327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09685687" y3="-4.60972637" z3="0.91640257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.12979645" y3="-0.06015252" z3="-1.71558875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40474901" y3="0.5958267" z3="-0.67369379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.4531066" y3="-1.12516137" z3="-1.15583956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64667279" y3="0.58026932" z3="0.50474994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.11587667" y3="0.22795458" z3="2.17860108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99182548" y3="1.48466682" z3="1.26039753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.43325507" y3="-0.11682703" z3="2.47163616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.80088807" y3="-1.74561261" z3="1.84464914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.42583489" y3="-1.50434682" z3="2.9668749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03374232" y3="-4.0305346" z3="0.95267998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47089151" y3="-4.35849992" z3="1.78650208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32572405" y3="-5.68333513" z3="0.90880059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28238192" y3="-2.20059657" z3="-0.18449883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13106872" y3="-3.28354059" z3="-1.06239172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48237635" y3="-4.44540049" z3="-0.66156037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99326605" y3="-4.51980719" z3="0.63734417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14759562" y3="-3.47479681" z3="1.54340407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78397317" y3="-2.31389987" z3="1.12271872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48591487" y3="-3.1972873" z3="-2.0926541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33354912" y3="-5.27509054" z3="-1.35362623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25924997" y3="-5.71494521" z3="1.0555531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7446641" y3="-3.57016478" z3="2.55279211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88172635" y3="-1.47501256" z3="1.81353611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50405141" y3="4.0277524" z3="-0.07201003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87082026" y3="3.79835869" z3="-0.15576313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37995435" y3="3.23102877" z3="-1.31918259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56442121" y3="2.92402325" z3="-2.40509395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19894719" y3="3.15736506" z3="-2.30372608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08228415" y3="4.42469113" z3="0.85436687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53802463" y3="4.02756744" z3="0.67605782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80907815" y3="2.915605" z3="-1.38926624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.00085615" y3="2.4924197" z3="-3.30663813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4527851" y3="2.89444516" z3="-3.13842133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17426983" y3="-5.94417863" z3="2.24120687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76025675" y3="-6.40554183" z3="0.185868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.26193719" y3="2.55792495" z3="-2.4554724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46179154" y3="3.01273359" z3="-0.3670394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66922758" y3="0.17380147" z3="-1.96223469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99005783" y3="1.41970116" z3="-1.82924739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.86968001" y3="0.10957333" z3="-2.72229293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.36474237" y3="1.22318083" z3="-3.35424851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.38697707" y3="-0.85128792" z3="-2.80448125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.28604697" y3="1.16166577" z3="-3.94011408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51181787" y3="2.54693271" z3="-2.52400281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.66679229" y3="2.451388" z3="-3.26258769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97936529" y3="3.49876018" z3="-2.47337504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.04644484" y3="3.33125755" z3="-3.78968495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56811113" y3="3.90434286" z3="-0.22219102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74086285" y3="5.05300993" z3="-0.05253166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90262498" y3="3.95990746" z3="0.269673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39868303" y3="5.10477984" z3="0.84561098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53697136" y3="3.07477473" z3="0.19229432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42682075" y3="5.12143631" z3="1.21804119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28754337" y3="6.22806339" z3="0.53354149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58927346" y3="6.25969517" z3="0.96810272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64396443" y3="7.10619377" z3="0.64418469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.99781476" y3="7.16675001" z3="1.42215299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39321015" y3="-3.9060557" z3="-2.85127388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56899896" y3="-4.94294563" z3="-2.53281277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27526456" y3="-3.57656162" z3="-3.42878787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53096057" y3="-3.89416754" z3="-3.53640005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72568042" y3="-1.5754924" z3="-2.07051905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47123392" y3="-1.10133505" z3="-2.7348196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55344054" y3="-0.91573702" z3="-1.20655148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78245382" y3="-1.61511899" z3="-2.63942947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9312,-.9557,-.6726;6.6328,-1.946,-1.5087;6.1134,-.9921,-1.3748;4.7949,1.4787,-1.0401;4.2952,.3079,-.496;2.6754,2.7325,-1.1829;4.0156,2.7337,-.8388;2.3702,4.9878,-.4142;1.8169,3.8444,-.9409;1.7369,5.8623,-.2352;2.1298,1.6046,-1.7238;3.1186,.3472,.195;1.7246,.3782,-.6943;.6013,.7339,.2087;1.6898,-.8624,-1.5589;1.0854,-2.4652,-1.3587;1.8765,-5.489,-6.3318;1.6376,-5.0521,-5.358;1.0062,-3.9058,-2.8855;1.6093,-3.6711,-5.213;1.3807,-5.8761,-4.2595;1.0791,-5.297,-3.0331;1.3031,-3.0666,-3.9836;1.8177,-3.0059,-6.0546;1.4282,-6.9641,-4.3522;.9146,-5.9279,-2.1555;.6307,-3.3545,-1.6334;-.3571,-3.8334,-.8684;-.7069,-4.8359,-1.1282;-.3661,-3.5261,.5796;-.353,-3.041,3.3373;-.6539,-4.5586,1.4808;-.0931,-2.245,1.0704;-.0837,-2.005,2.4403;-.6385,-4.3186,2.8538;-.8476,-5.5695,1.1084;.1038,-1.4083,.4039;.146,-.9966,2.7923;-.8266,-5.1427,3.5498;-.3332,-2.8573,4.4157;1.2566,-1.7304,-3.9535;1.4275,-1.3272,-3.0562;.3514,3.6952,-1.131;-2.1554,-2.9655,-1.6869;-2.9219,-3.1494,-.5322;-3.0963,-2.2815,.4101;-3.8281,-.7218,.6845;-4.7824,-.2982,-.8606;-2.5143,.4902,1.1832;-4.9794,-1.0612,2.1203;-3.4013,-4.3618,-.2967;-4.0969,-4.6097,.9164;-4.1298,-.0602,-1.7156;-5.4047,.5958,-.6737;-5.4531,-1.1252,-1.1558;-1.6467,.5803,.5047;-2.1159,.228,2.1786;-2.9918,1.4847,1.2604;-5.4333,-.1168,2.4716;-5.8009,-1.7456,1.8446;-4.4258,-1.5043,2.9669;-5.0337,-4.0305,.9527;-3.4709,-4.3585,1.7865;-4.3257,-5.6833,.9088;4.2824,-2.2006,-.1845;4.1311,-3.2835,-1.0624;3.4824,-4.4454,-.6616;2.9933,-4.5198,.6373;3.1476,-3.4748,1.5434;3.784,-2.3139,1.1227;4.4859,-3.1973,-2.0927;3.3335,-5.2751,-1.3536;2.2592,-5.7149,1.0556;2.7447,-3.5702,2.5528;3.8817,-1.475,1.8135;-.5041,4.0278,-.072;-1.8708,3.7984,-.1558;-2.38,3.231,-1.3192;-1.5644,2.924,-2.4051;-.1989,3.1574,-2.3037;-.0823,4.4247,.8544;-2.538,4.0276,.6761;-3.8091,2.9156,-1.3893;-2.0009,2.4924,-3.3066;.4528,2.8944,-3.1384;2.1743,-5.9442,2.2412;1.7603,-6.4055,.1859;-4.2619,2.5579,-2.4555;-4.4618,3.0127,-.367;6.6692,.1738,-1.9622;5.9901,1.4197,-1.8292;7.8697,.1096,-2.7223;8.3647,1.2232,-3.3542;8.387,-.8513,-2.8045;9.286,1.1617,-3.9401;6.5118,2.5469,-2.524;7.6668,2.4514,-3.2626;5.9794,3.4988,-2.4734;8.0464,3.3313,-3.7897;4.5681,3.9043,-.2222;3.7409,5.053,-.0525;5.9026,3.9599,.2697;6.3987,5.1048,.8456;6.537,3.0748,.1923;7.4268,5.1214,1.218;4.2875,6.2281,.5335;5.5893,6.2597,.9681;3.644,7.1062,.6442;5.9978,7.1668,1.4222;-2.3932,-3.9061,-2.8513;-2.569,-4.9429,-2.5328;-3.2753,-3.5766,-3.4288;-1.531,-3.8942,-3.5364;-1.7257,-1.5755,-2.0705;-2.4712,-1.1013,-2.7348;-1.5534,-.9157,-1.2066;-.7825,-1.6151,-2.6394;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662842572341</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004239933502 0.000498393311 0.022148610547 0.005340627121</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056876856 -0.001340439 0.000177538 0.000276473 0.000338337 0.000404896 0.000426310 0.000527059 0.000600459 0.000668135 0.000784178 0.000892861 0.001063450 0.001132131 0.001281904 0.001333836 0.001373151 0.001520303 0.001781657 0.001994704 0.002272092 0.002402403 0.002500284 0.003081988 0.003298556 0.003732266 0.004065923 0.004351297 0.004588888 0.004626575 0.004898773 0.005168848 0.005840575 0.005971044 0.006209190 0.006652147 0.006908823 0.007178961 0.007394257 0.008091364 0.008348222 0.009095738 0.009635539 0.009869767 0.010883267 0.011108081 0.011279153 0.011997498 0.013174976 0.013287987 0.013823237 0.014541584 0.014857622 0.015429046 0.015671092 0.016319043 0.016405951 0.016836375 0.017935717 0.019007480 0.019795688 0.020235889 0.021016515 0.021544778 0.022095501 0.022679615 0.023340165 0.023589738 0.024443668 0.025820993 0.026317377 0.026564457 0.026968269 0.027162773 0.027956266 0.028695129 0.030208956 0.030489143 0.032646436 0.032926120 0.034302997 0.035660251 0.038771244 0.039137012 0.041796219 0.045338912 0.045468849 0.045789980 0.048473043 0.049200926 0.049677817 0.050131273 0.051523404 0.051863241 0.052011728 0.052282948 0.052381179 0.052792337 0.053340076 0.055310418 0.056261971 0.056498561 0.056595632 0.056961159 0.057556465 0.058292466 0.059140616 0.059448281 0.060758599 0.061859238 0.062143306 0.063822434 0.064185831 0.064815622 0.065454755 0.066768228 0.067666225 0.068818999 0.069719690 0.071775318 0.072058661 0.072418350 0.072884975 0.075265868 0.077958967 0.080488940 0.081186871 0.083076680 0.083283606 0.086448603 0.088483735 0.089274584 0.089758599 0.091240398 0.093199338 0.094458336 0.095363116 0.096040507 0.096787186 0.098002462 0.099961104 0.100339628 0.102205685 0.102635964 0.103333158 0.103935132 0.104952050 0.107997773 0.110553243 0.111804204 0.112298067 0.113142814 0.114220194 0.116059171 0.116718094 0.117438893 0.118435181 0.121679406 0.124337797 0.125058334 0.128091674 0.128483616 0.129821894 0.133187108 0.135906757 0.137206626 0.138247079 0.138510568 0.139773549 0.141657599 0.143424252 0.145532544 0.146138728 0.151613362 0.153163959 0.153292071 0.159921899 0.160821010 0.168273964 0.171177148 0.175105487 0.178689863 0.181248619 0.183818574 0.188392592 0.188755292 0.191129886 0.200542208 0.202022535 0.205814023 0.206626123 0.207188375 0.210163628 0.211857434 0.212510056 0.213428749 0.216483733 0.218241506 0.220543280 0.223821530 0.225373199 0.231767973 0.233229286 0.234594520 0.238305216 0.245080681 0.247156891 0.250709688 0.256275483 0.256559381 0.257153686 0.262233226 0.271501980 0.282627066 0.291648889 0.299447478 0.299853443 0.300705272 0.306955513 0.307721450 0.309593243 0.318423811 0.321098832 0.326180742 0.328993156 0.335221766 0.347271752 0.351318976 0.355550881 0.359406015 0.360487353 0.364008282 0.383887779 0.406567950 0.411776613 0.430108912 0.431677893 0.434197883 0.448787904 0.464144569 0.473343186 0.477943480 0.478501424 0.486217866 0.498718554 0.502350998 0.513774872 0.516255763 0.543181187 0.565650967 0.567265297 0.585061218 0.591793277 0.605613724 0.642819017 0.645040703 0.665784474 0.675323270 0.685483124 0.692638246 0.700919696 0.702859474 0.704255608 0.716942186 0.731430046 0.736832788 0.737969523 0.747122268 0.750741149 0.771601655 0.775949216 0.807335615 0.819287724 0.821579704 0.827937226 0.833777066 0.846238361 0.847234422 0.849328404 0.853566343 0.859998830 0.867384399 0.874891601 0.881098880 0.887246781 0.889468975 0.892298853 0.900776905 0.908387496 0.915445727 0.917616106 0.924386786 0.931657628 0.934646475 0.953618390 0.956587892 0.961863216 0.969571358 0.975164117 0.982153759 0.998502198 1.004325983 1.013624060 1.019014345 1.039172065 1.050242591 1.055409345 1.069206047 1.077244779 1.087038036 1.103252223 1.110240518 1.111578851 1.117861011 1.122496721 1.123500478 1.135071011 1.147963738 1.161612030 1.169941759 1.176504120 1.184671854 1.200562408 1.220249897 1.231075370 1.248240744 1.296200052 1.296300316 1.314573287 1.326258085 1.326619646 1.329846093 1.330214700 1.334635030 1.341341717 1.347553344 1.363498442 1.378872375 1.380944333 1.381539207 1.426359816 1.509641536 1.557871217 1.673153689 1.918121123</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">150</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93437069" y3="-0.95556162" z3="-0.67030031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63804933" y3="-1.94523018" z3="-1.50292063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11814916" y3="-0.99150558" z3="-1.36971687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79795853" y3="1.47899536" z3="-1.03748357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29779433" y3="0.30789222" z3="-0.49446052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67759077" y3="2.73105447" z3="-1.18543791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01713613" y3="2.73352972" z3="-0.83844143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36934696" y3="4.98726152" z3="-0.42089307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81783952" y3="3.84258742" z3="-0.94678457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73522683" y3="5.8616985" z3="-0.24469098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13379366" y3="1.6022962" z3="-1.72615908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12008581" y3="0.34652482" z3="0.19483484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72727227" y3="0.37680489" z3="-0.69608411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60293648" y3="0.73354393" z3="0.2053186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69316836" y3="-0.86422075" z3="-1.55998287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08385485" y3="-2.46545335" z3="-1.360763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.86622722" y3="-5.48523963" z3="-6.33696134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62892533" y3="-5.04908231" z3="-5.36243824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00158624" y3="-3.90465947" z3="-2.88816945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60155539" y3="-3.66819535" z3="-5.21630963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37319713" y3="-5.8739448" z3="-4.264345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07369485" y3="-5.29575433" z3="-3.03705601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2973341" y3="-3.06466082" z3="-3.98598898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.8092043" y3="-3.00233994" z3="-6.05753208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.42000975" y3="-6.96183115" z3="-4.35806057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91034934" y3="-5.92728415" z3="-2.15964041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62836008" y3="-3.35432987" z3="-1.63517034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36089205" y3="-3.83047153" z3="-0.87047148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71112791" y3="-4.83331689" z3="-1.12982936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36570598" y3="-3.52700562" z3="0.57872541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35294019" y3="-3.04248031" z3="3.33599341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65406131" y3="-4.55989444" z3="1.47917769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0874875" y3="-2.2490562" z3="1.07118975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.07848171" y3="-2.00863523" z3="2.44080738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.63890113" y3="-4.31983783" z3="2.85215215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.84939316" y3="-5.56977594" z3="1.10628384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1011936" y3="-1.40753551" z3="0.39933481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14967102" y3="-0.99782129" z3="2.79207365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83136074" y3="-5.14213469" z3="3.54519694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33623143" y3="-2.85685543" z3="4.41381976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25130207" y3="-1.72842765" z3="-3.95443215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42572218" y3="-1.32670078" z3="-3.05735543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35267453" y3="3.69199748" z3="-1.13891301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15603601" y3="-2.96205232" z3="-1.68501428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92175382" y3="-3.14887733" z3="-0.52908213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09428867" y3="-2.28314266" z3="0.41525344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8264275" y3="-0.72289541" z3="0.69210535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.79004511" y3="-0.30295748" z3="-0.84873176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51214565" y3="0.49175756" z3="1.18119755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.96827687" y3="-1.06175279" z3="2.13584619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40091126" y3="-4.3621797" z3="-0.29481107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.09895275" y3="-4.61030583" z3="0.91569421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.14241979" y3="-0.07245589" z3="-1.7096289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40677139" y3="0.59538754" z3="-0.66320895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.46736834" y3="-1.12826189" z3="-1.13520487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6472786" y3="0.58126473" z3="0.49906601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1089056" y3="0.23299951" z3="2.1757612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99135264" y3="1.48519089" z3="1.25864133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.42159066" y3="-0.11771018" z3="2.48922183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.79029923" y3="-1.74807387" z3="1.86679775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.40825908" y3="-1.50335867" z3="2.97986769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03727056" y3="-4.03214946" z3="0.94816608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47609146" y3="-4.35734263" z3="1.78784217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32515375" y3="-5.68556758" z3="0.90814089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28417968" y3="-2.2005441" z3="-0.18417601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13145521" y3="-3.28183576" z3="-1.06381977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4808766" y3="-4.44332587" z3="-0.6648802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99230628" y3="-4.51951334" z3="0.63414386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14783159" y3="-3.47596726" z3="1.54180097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78525341" y3="-2.31492516" z3="1.12272622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48660603" y3="-3.19438777" z3="-2.0938799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32997364" y3="-5.27107388" z3="-1.35849241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25680051" y3="-5.71408883" z3="1.05048498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74466471" y3="-3.57235233" z3="2.55100048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88343791" y3="-1.47663214" z3="1.81441112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50438262" y3="4.02652451" z3="-0.08143118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87075044" y3="3.79544578" z3="-0.16611614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37759922" y3="3.22349377" z3="-1.32776834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56075649" y3="2.9147885" z3="-2.4127232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19582495" y3="3.15054294" z3="-2.31107527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08372951" y3="4.42598129" z3="0.84472316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53958148" y3="4.02721341" z3="0.66288469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80614494" y3="2.9057132" z3="-1.39841433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.99563939" y3="2.47972435" z3="-3.31325337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45724914" y3="2.88557841" z3="-3.1439786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17438762" y3="-5.94723878" z3="2.23587501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75333618" y3="-6.39968408" z3="0.17925783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.25661586" y3="2.54124906" z3="-2.46309966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4606337" y3="3.00750045" z3="-0.37769397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.67513749" y3="0.17489367" z3="-1.95524284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99505922" y3="1.42050961" z3="-1.82380475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.87778211" y3="0.11132972" z3="-2.7119083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.37421705" y3="1.22525276" z3="-3.34220902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.39576595" y3="-0.84927872" z3="-2.79275595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2973188" y3="1.16427626" z3="-3.92531444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51820754" y3="2.5479746" z3="-2.51714371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.67535119" y3="2.45307107" z3="-3.25243921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9851871" y3="3.49957083" z3="-2.46799852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.05604981" y3="3.33318172" z3="-3.77835431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56736567" y3="3.90532055" z3="-0.22204711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73909584" y3="5.05385986" z3="-0.05627027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90054344" y3="3.9622754" z3="0.27332369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39462717" y3="5.10830207" z3="0.84854785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53545487" y3="3.07723561" z3="0.19922844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42176572" y3="5.12593603" z3="1.22380131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28376396" y3="6.23020869" z3="0.52904053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58441806" y3="6.26314333" z3="0.96680802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63948664" y3="7.10833555" z3="0.63668318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.99141987" y3="7.17117935" z3="1.42016399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39753491" y3="-3.89926261" z3="-2.85175349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56847809" y3="-4.93946735" z3="-2.52960666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28542762" y3="-3.5737152" z3="-3.428629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53735181" y3="-3.88498714" z3="-3.53994008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72664908" y3="-1.57103571" z3="-2.06721643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47265865" y3="-1.09467234" z3="-2.72894336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55229765" y3="-0.91228542" z3="-1.20247887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78505527" y3="-1.61113249" z3="-2.63812146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9344,-.9556,-.6703;6.638,-1.9452,-1.5029;6.1181,-.9915,-1.3697;4.798,1.479,-1.0375;4.2978,.3079,-.4945;2.6776,2.7311,-1.1854;4.0171,2.7335,-.8384;2.3693,4.9873,-.4209;1.8178,3.8426,-.9468;1.7352,5.8617,-.2447;2.1338,1.6023,-1.7262;3.1201,.3465,.1948;1.7273,.3768,-.6961;.6029,.7335,.2053;1.6932,-.8642,-1.56;1.0839,-2.4655,-1.3608;1.8662,-5.4852,-6.337;1.6289,-5.0491,-5.3624;1.0016,-3.9047,-2.8882;1.6016,-3.6682,-5.2163;1.3732,-5.8739,-4.2643;1.0737,-5.2958,-3.0371;1.2973,-3.0647,-3.986;1.8092,-3.0023,-6.0575;1.42,-6.9618,-4.3581;.9103,-5.9273,-2.1596;.6284,-3.3543,-1.6352;-.3609,-3.8305,-.8705;-.7111,-4.8333,-1.1298;-.3657,-3.527,.5787;-.3529,-3.0425,3.336;-.6541,-4.5599,1.4792;-.0875,-2.2491,1.0712;-.0785,-2.0086,2.4408;-.6389,-4.3198,2.8522;-.8494,-5.5698,1.1063;.1012,-1.4075,.3993;.1497,-.9978,2.7921;-.8314,-5.1421,3.5452;-.3362,-2.8569,4.4138;1.2513,-1.7284,-3.9544;1.4257,-1.3267,-3.0574;.3527,3.692,-1.1389;-2.156,-2.9621,-1.685;-2.9218,-3.1489,-.5291;-3.0943,-2.2831,.4153;-3.8264,-.7229,.6921;-4.79,-.303,-.8487;-2.5121,.4918,1.1812;-4.9683,-1.0618,2.1358;-3.4009,-4.3622,-.2948;-4.099,-4.6103,.9157;-4.1424,-.0725,-1.7096;-5.4068,.5954,-.6632;-5.4674,-1.1283,-1.1352;-1.6473,.5813,.4991;-2.1089,.233,2.1758;-2.9914,1.4852,1.2586;-5.4216,-.1177,2.4892;-5.7903,-1.7481,1.8668;-4.4083,-1.5034,2.9799;-5.0373,-4.0321,.9482;-3.4761,-4.3573,1.7878;-4.3252,-5.6856,.9081;4.2842,-2.2005,-.1842;4.1315,-3.2818,-1.0638;3.4809,-4.4433,-.6649;2.9923,-4.5195,.6341;3.1478,-3.476,1.5418;3.7853,-2.3149,1.1227;4.4866,-3.1944,-2.0939;3.33,-5.2711,-1.3585;2.2568,-5.7141,1.0505;2.7447,-3.5724,2.551;3.8834,-1.4766,1.8144;-.5044,4.0265,-.0814;-1.8708,3.7954,-.1661;-2.3776,3.2235,-1.3278;-1.5608,2.9148,-2.4127;-.1958,3.1505,-2.3111;-.0837,4.426,.8447;-2.5396,4.0272,.6629;-3.8061,2.9057,-1.3984;-1.9956,2.4797,-3.3133;.4572,2.8856,-3.144;2.1744,-5.9472,2.2359;1.7533,-6.3997,.1793;-4.2566,2.5412,-2.4631;-4.4606,3.0075,-.3777;6.6751,.1749,-1.9552;5.9951,1.4205,-1.8238;7.8778,.1113,-2.7119;8.3742,1.2253,-3.3422;8.3958,-.8493,-2.7928;9.2973,1.1643,-3.9253;6.5182,2.548,-2.5171;7.6754,2.4531,-3.2524;5.9852,3.4996,-2.468;8.056,3.3332,-3.7784;4.5674,3.9053,-.222;3.7391,5.0539,-.0563;5.9005,3.9623,.2733;6.3946,5.1083,.8485;6.5355,3.0772,.1992;7.4218,5.1259,1.2238;4.2838,6.2302,.529;5.5844,6.2631,.9668;3.6395,7.1083,.6367;5.9914,7.1712,1.4202;-2.3975,-3.8993,-2.8518;-2.5685,-4.9395,-2.5296;-3.2854,-3.5737,-3.4286;-1.5374,-3.885,-3.5399;-1.7266,-1.571,-2.0672;-2.4727,-1.0947,-2.7289;-1.5523,-.9123,-1.2025;-.7851,-1.6111,-2.6381;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662836626763</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003318635548 0.000418041128 0.022652073242 0.005350283562</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056876992 -0.000938415 0.000175774 0.000275045 0.000338355 0.000405043 0.000425776 0.000525588 0.000599873 0.000668823 0.000784681 0.000892857 0.001065477 0.001132196 0.001282155 0.001336171 0.001373292 0.001520527 0.001782708 0.002003859 0.002271819 0.002401594 0.002503979 0.003087845 0.003306122 0.003733792 0.004065783 0.004354705 0.004590691 0.004628585 0.004899129 0.005174195 0.005856401 0.005971249 0.006264595 0.006652684 0.006930662 0.007195127 0.007411324 0.008091742 0.008349668 0.009098981 0.009653014 0.009871288 0.010884404 0.011111595 0.011297615 0.011996899 0.013175731 0.013290562 0.013827840 0.014541713 0.014858723 0.015429185 0.015680016 0.016346322 0.016408208 0.016836588 0.017939276 0.019043721 0.019799674 0.020236062 0.021018670 0.021550910 0.022095579 0.022679683 0.023340633 0.023589436 0.024443750 0.025821036 0.026317405 0.026565329 0.026977129 0.027163155 0.027959017 0.028705003 0.030214609 0.030492597 0.032646931 0.032928316 0.034303173 0.035666434 0.038773668 0.039143318 0.041796210 0.045338961 0.045468315 0.045829287 0.048482756 0.049257669 0.049681837 0.050133414 0.051523407 0.051865818 0.052012582 0.052282948 0.052381234 0.052794143 0.053343947 0.055312033 0.056262328 0.056499652 0.056595570 0.056961321 0.057562073 0.058303994 0.059151955 0.059489900 0.060758789 0.061895412 0.062158657 0.063948561 0.064188982 0.064816792 0.065469005 0.066777142 0.067668742 0.068827509 0.069808880 0.071774888 0.072065432 0.072422244 0.072885554 0.075267617 0.077961053 0.080497819 0.081215891 0.083077535 0.083288002 0.086449004 0.088493033 0.089277289 0.089759250 0.091241649 0.093199332 0.094458356 0.095365673 0.096040358 0.096787396 0.098017255 0.099961379 0.100340615 0.102281972 0.102764614 0.103426641 0.103981162 0.104963578 0.107997899 0.110561863 0.111809601 0.112359916 0.113173731 0.114229250 0.116063448 0.116727917 0.117511535 0.118435415 0.121679456 0.124338455 0.125063132 0.128092532 0.128486203 0.129878091 0.133188110 0.135906913 0.137207005 0.138249009 0.138511522 0.139780707 0.141659469 0.143426624 0.145534168 0.146138852 0.151613759 0.153178538 0.153295578 0.159922700 0.160821855 0.168293482 0.171177064 0.175221936 0.178692686 0.181250895 0.183820275 0.188477496 0.188780030 0.191144288 0.200558194 0.202029632 0.205813787 0.206628231 0.207188519 0.210277440 0.211861883 0.212510511 0.213428802 0.216488923 0.218241470 0.220543276 0.223821637 0.225373182 0.231772903 0.233272005 0.234594771 0.238305232 0.245087918 0.247160694 0.250786077 0.256320750 0.256586361 0.257162033 0.262233213 0.271504884 0.282627553 0.291648902 0.299492217 0.299853730 0.300713245 0.306955566 0.307723599 0.309593600 0.318424055 0.321099327 0.326180794 0.329066602 0.335221787 0.347275938 0.351323220 0.355551249 0.359406623 0.360502958 0.364010525 0.383892751 0.406569606 0.411782204 0.430113139 0.431677579 0.434310313 0.448799434 0.464148771 0.473350411 0.477975365 0.478883255 0.486225579 0.498780591 0.502385496 0.513775015 0.516256530 0.543186676 0.565657178 0.567266173 0.585251090 0.591794308 0.605613786 0.643002738 0.645048063 0.665791788 0.675323618 0.685492526 0.692738625 0.700982152 0.702863095 0.704256786 0.716948881 0.731453949 0.736832354 0.737969514 0.747124273 0.750741459 0.771601656 0.775949221 0.807337967 0.819431561 0.821579859 0.827948943 0.833784188 0.846335739 0.847256582 0.849434692 0.853699666 0.860064760 0.867385737 0.874893211 0.881105906 0.887258075 0.889470361 0.892340277 0.900779373 0.908479592 0.915445967 0.917625404 0.924386914 0.931668543 0.934717542 0.953653499 0.956610785 0.961985673 0.969575454 0.975164722 0.982153790 0.998502257 1.004326463 1.013729230 1.019105832 1.039259708 1.050510956 1.055412824 1.069232256 1.077516207 1.087041940 1.103256898 1.110240626 1.111579287 1.117866544 1.122496724 1.123500501 1.135119973 1.148084759 1.161633515 1.169941812 1.176504128 1.185592542 1.200562890 1.220428808 1.231081248 1.248309703 1.296210629 1.296302291 1.314573635 1.326259176 1.326621185 1.329846308 1.330223272 1.334635305 1.341345807 1.347555203 1.363498536 1.378878103 1.380945643 1.381540206 1.426362670 1.509643667 1.557871230 1.673207253 1.918121848</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">151</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93739922" y3="-0.95492525" z3="-0.66729049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6433621" y3="-1.94425565" z3="-1.49550906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1229974" y3="-0.99061093" z3="-1.36356037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80089555" y3="1.47945903" z3="-1.03516347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30005528" y3="0.30829516" z3="-0.49284957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67995881" y3="2.72995463" z3="-1.18835982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01887456" y3="2.73364512" z3="-0.8388819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36900858" y3="4.98727176" z3="-0.42788175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81908085" y3="3.84132547" z3="-0.95271293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73406207" y3="5.86165888" z3="-0.25408615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13767784" y3="1.60032894" z3="-1.72876635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12114785" y3="0.34638543" z3="0.19442504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7295936" y3="0.37558965" z3="-0.69840949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6039208" y3="0.73245163" z3="0.20125621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69695338" y3="-0.8659447" z3="-1.56172191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08350416" y3="-2.46558214" z3="-1.36190093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85522581" y3="-5.48077537" z3="-6.3430452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61993959" y3="-5.04529958" z3="-5.36768711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99761087" y3="-3.90269777" z3="-2.89134945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59309417" y3="-3.66448816" z3="-5.22052248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36622839" y3="-5.87096945" z3="-4.26966998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06908075" y3="-5.2936505" z3="-3.04133692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29147777" y3="-3.0618867" z3="-3.98906962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79908578" y3="-2.99801762" z3="-6.06176153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.41266019" y3="-6.95878792" z3="-4.36432223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90679149" y3="-5.92584002" z3="-2.16426654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62589694" y3="-3.35273674" z3="-1.63763478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36162696" y3="-3.83097032" z3="-0.87129251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.7129363" y3="-4.8328793" z3="-1.13152318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36684568" y3="-3.526148" z3="0.57733637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35191558" y3="-3.04443502" z3="3.33537093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6573245" y3="-4.55851798" z3="1.47729487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09088059" y3="-2.24575624" z3="1.06931165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.0807452" y3="-2.00751839" z3="2.4392564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64137316" y3="-4.31999656" z3="2.85037119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.855156" y3="-5.56691667" z3="1.10307125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1055085" y3="-1.40750859" z3="0.40279833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15062184" y3="-0.99924661" z3="2.79208307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83386396" y3="-5.14324353" z3="3.54377236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33224057" y3="-2.86113859" z3="4.41373074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24551968" y3="-1.72570539" z3="-3.95610859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42279619" y3="-1.32523822" z3="-3.05897838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35430282" y3="3.68894717" z3="-1.14612463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15904007" y3="-2.96055088" z3="-1.6840517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92390042" y3="-3.14778479" z3="-0.52859693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0949813" y3="-2.28289783" z3="0.41716852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82519801" y3="-0.72458343" z3="0.69982303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.79814746" y3="-0.30770727" z3="-0.83562318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51035858" y3="0.49314625" z3="1.18203358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.95702587" y3="-1.06494893" z3="2.15077977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40543757" y3="-4.36006994" z3="-0.29736806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10219987" y3="-4.61075358" z3="0.91420315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.15551658" y3="-0.08448917" z3="-1.70223556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40998558" y3="0.59361714" z3="-0.64997567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.47987435" y3="-1.13221414" z3="-1.1125528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64825406" y3="0.58358338" z3="0.49699986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.10302669" y3="0.23696265" z3="2.17559017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9910667" y3="1.48615421" z3="1.25920923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.40948698" y3="-0.12198816" z3="2.50699331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.77946744" y3="-1.75320371" z3="1.88772148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.39010378" y3="-1.50442897" z3="2.99083913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03955764" y3="-4.03175394" z3="0.94980795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47783614" y3="-4.36112482" z3="1.785861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33085621" y3="-5.68423457" z3="0.90352114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28600115" y3="-2.20005849" z3="-0.18321673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13272231" y3="-3.27993125" z3="-1.0645364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48117365" y3="-4.44163038" z3="-0.66751401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99180905" y3="-4.51904939" z3="0.63117927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14744716" y3="-3.47672502" z3="1.54027967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78631093" y3="-2.31582357" z3="1.12320537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48828106" y3="-3.19109672" z3="-2.09432548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33008989" y3="-5.26870863" z3="-1.36223774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25500107" y3="-5.71377384" z3="1.04538591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74343264" y3="-3.57397877" z3="2.54904275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88496027" y3="-1.4786662" z3="1.81608578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50401924" y3="4.02529021" z3="-0.0904504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87002319" y3="3.79225078" z3="-0.17550322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37535361" y3="3.21674229" z3="-1.33627157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55715114" y3="2.9059825" z3="-2.41945184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19250659" y3="3.14355847" z3="-2.31711351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08491653" y3="4.42785066" z3="0.83476953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53948064" y3="4.02472677" z3="0.65339704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8035612" y3="2.89702779" z3="-1.40709456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.99083457" y3="2.46786088" z3="-3.31912005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4617821" y3="2.87674358" z3="-3.14834148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16319304" y3="-5.94201215" z3="2.22931709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75951088" y3="-6.40430071" z3="0.17389906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.25247336" y3="2.52639936" z3="-2.47032491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45934253" y3="3.00365951" z3="-0.38769978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68133375" y3="0.17601338" z3="-1.94734162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00018164" y3="1.42127926" z3="-1.81827274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.88656909" y3="0.11295545" z3="-2.69992831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.38461204" y3="1.22703046" z3="-3.32868877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.40538116" y3="-0.8473653" z3="-2.77872582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.30984721" y3="1.16650251" z3="-3.90846375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52489984" y3="2.54876681" z3="-2.51043167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.68463288" y3="2.45439688" z3="-3.24171685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99120264" y3="3.50006347" z3="-2.46344967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.06660126" y3="3.33463254" z3="-3.76652243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56721363" y3="3.90670272" z3="-0.22310739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73811875" y3="5.05521019" z3="-0.06101237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89930687" y3="3.9651081" z3="0.27500842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39181182" y3="5.1124933" z3="0.84894481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53467863" y3="3.08010365" z3="0.20406389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41821351" y3="5.13122127" z3="1.22615768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28113884" y3="6.23297388" z3="0.52311001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58094016" y3="6.2673468" z3="0.96327318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63625973" y3="7.11101539" z3="0.62766636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98673925" y3="7.17650081" z3="1.41557108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40091358" y3="-3.89793918" z3="-2.85127396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5735486" y3="-4.93686045" z3="-2.53478725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2868091" y3="-3.56882004" z3="-3.42521894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54145541" y3="-3.88216364" z3="-3.53989404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73016183" y3="-1.56861455" z3="-2.06541017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47793711" y3="-1.09120811" z3="-2.72479631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55296671" y3="-0.91141174" z3="-1.20041496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78938272" y3="-1.60795954" z3="-2.63817598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9374,-.9549,-.6673;6.6434,-1.9443,-1.4955;6.123,-.9906,-1.3636;4.8009,1.4795,-1.0352;4.3001,.3083,-.4928;2.68,2.73,-1.1884;4.0189,2.7336,-.8389;2.369,4.9873,-.4279;1.8191,3.8413,-.9527;1.7341,5.8617,-.2541;2.1377,1.6003,-1.7288;3.1211,.3464,.1944;1.7296,.3756,-.6984;.6039,.7325,.2013;1.697,-.8659,-1.5617;1.0835,-2.4656,-1.3619;1.8552,-5.4808,-6.343;1.6199,-5.0453,-5.3677;.9976,-3.9027,-2.8913;1.5931,-3.6645,-5.2205;1.3662,-5.871,-4.2697;1.0691,-5.2937,-3.0413;1.2915,-3.0619,-3.9891;1.7991,-2.998,-6.0618;1.4127,-6.9588,-4.3643;.9068,-5.9258,-2.1643;.6259,-3.3527,-1.6376;-.3616,-3.831,-.8713;-.7129,-4.8329,-1.1315;-.3668,-3.5261,.5773;-.3519,-3.0444,3.3354;-.6573,-4.5585,1.4773;-.0909,-2.2458,1.0693;-.0807,-2.0075,2.4393;-.6414,-4.32,2.8504;-.8552,-5.5669,1.1031;.1055,-1.4075,.4028;.1506,-.9992,2.7921;-.8339,-5.1432,3.5438;-.3322,-2.8611,4.4137;1.2455,-1.7257,-3.9561;1.4228,-1.3252,-3.059;.3543,3.6889,-1.1461;-2.159,-2.9606,-1.6841;-2.9239,-3.1478,-.5286;-3.095,-2.2829,.4172;-3.8252,-.7246,.6998;-4.7981,-.3077,-.8356;-2.5104,.4931,1.182;-4.957,-1.0649,2.1508;-3.4054,-4.3601,-.2974;-4.1022,-4.6108,.9142;-4.1555,-.0845,-1.7022;-5.41,.5936,-.65;-5.4799,-1.1322,-1.1126;-1.6483,.5836,.497;-2.103,.237,2.1756;-2.9911,1.4862,1.2592;-5.4095,-.122,2.507;-5.7795,-1.7532,1.8877;-4.3901,-1.5044,2.9908;-5.0396,-4.0318,.9498;-3.4778,-4.3611,1.7859;-4.3309,-5.6842,.9035;4.286,-2.2001,-.1832;4.1327,-3.2799,-1.0645;3.4812,-4.4416,-.6675;2.9918,-4.519,.6312;3.1474,-3.4767,1.5403;3.7863,-2.3158,1.1232;4.4883,-3.1911,-2.0943;3.3301,-5.2687,-1.3622;2.255,-5.7138,1.0454;2.7434,-3.574,2.549;3.885,-1.4787,1.8161;-.504,4.0253,-.0905;-1.87,3.7923,-.1755;-2.3754,3.2167,-1.3363;-1.5572,2.906,-2.4195;-.1925,3.1436,-2.3171;-.0849,4.4279,.8348;-2.5395,4.0247,.6534;-3.8036,2.897,-1.4071;-1.9908,2.4679,-3.3191;.4618,2.8767,-3.1483;2.1632,-5.942,2.2293;1.7595,-6.4043,.1739;-4.2525,2.5264,-2.4703;-4.4593,3.0037,-.3877;6.6813,.176,-1.9473;6.0002,1.4213,-1.8183;7.8866,.113,-2.6999;8.3846,1.227,-3.3287;8.4054,-.8474,-2.7787;9.3098,1.1665,-3.9085;6.5249,2.5488,-2.5104;7.6846,2.4544,-3.2417;5.9912,3.5001,-2.4634;8.0666,3.3346,-3.7665;4.5672,3.9067,-.2231;3.7381,5.0552,-.061;5.8993,3.9651,.275;6.3918,5.1125,.8489;6.5347,3.0801,.2041;7.4182,5.1312,1.2262;4.2811,6.233,.5231;5.5809,6.2673,.9633;3.6363,7.111,.6277;5.9867,7.1765,1.4156;-2.4009,-3.8979,-2.8513;-2.5735,-4.9369,-2.5348;-3.2868,-3.5688,-3.4252;-1.5415,-3.8822,-3.5399;-1.7302,-1.5686,-2.0654;-2.4779,-1.0912,-2.7248;-1.553,-.9114,-1.2004;-.7894,-1.608,-2.6382;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662822471422</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002794954568 0.000439672062 0.019968233256 0.005352949703</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056878869 -0.000974642 0.000175429 0.000269495 0.000337445 0.000405768 0.000425726 0.000523769 0.000599475 0.000669679 0.000785981 0.000893004 0.001063554 0.001132158 0.001282014 0.001338044 0.001373586 0.001520473 0.001785329 0.002005681 0.002271776 0.002402244 0.002510981 0.003099763 0.003317773 0.003735989 0.004066710 0.004356272 0.004592691 0.004627734 0.004908028 0.005179511 0.005883276 0.005972828 0.006386991 0.006651791 0.006963504 0.007236294 0.007492799 0.008091726 0.008356309 0.009113024 0.009667379 0.009874721 0.010891224 0.011113707 0.011296931 0.011999045 0.013176370 0.013290264 0.013832551 0.014541845 0.014858758 0.015431383 0.015689244 0.016366013 0.016408451 0.016837635 0.017952170 0.019069953 0.019804265 0.020236381 0.021020404 0.021554838 0.022096067 0.022679628 0.023340642 0.023589866 0.024443796 0.025821083 0.026317553 0.026565774 0.026987712 0.027163780 0.027964414 0.028720631 0.030232502 0.030493278 0.032647856 0.032928661 0.034303486 0.035667338 0.038774738 0.039143090 0.041798678 0.045339327 0.045468272 0.045826420 0.048484703 0.049262613 0.049681985 0.050133162 0.051523413 0.051866475 0.052012545 0.052282966 0.052381258 0.052805261 0.053346343 0.055312329 0.056263716 0.056500133 0.056596362 0.056961384 0.057563598 0.058310165 0.059155004 0.059498292 0.060759847 0.061915669 0.062158625 0.064041634 0.064191742 0.064817308 0.065474198 0.066776689 0.067668846 0.068829782 0.069887010 0.071775733 0.072077596 0.072422820 0.072885967 0.075267615 0.077961965 0.080500966 0.081225798 0.083077668 0.083291227 0.086449264 0.088510558 0.089278547 0.089759329 0.091241861 0.093199704 0.094458443 0.095370690 0.096043320 0.096787429 0.098037919 0.099962041 0.100340722 0.102319660 0.102902328 0.103526118 0.104065266 0.104966109 0.107997845 0.110565125 0.111823996 0.112399582 0.113205558 0.114233912 0.116063830 0.116735630 0.117562084 0.118437185 0.121680968 0.124339140 0.125078631 0.128098697 0.128490705 0.129912475 0.133189577 0.135907526 0.137206947 0.138249730 0.138511689 0.139782898 0.141659292 0.143428256 0.145535323 0.146142074 0.151614180 0.153188165 0.153297684 0.159923171 0.160823653 0.168299851 0.171178800 0.175340015 0.178694925 0.181253487 0.183821747 0.188538635 0.188833129 0.191154590 0.200560551 0.202032256 0.205815691 0.206635757 0.207188523 0.210354326 0.211865982 0.212511131 0.213429734 0.216491535 0.218241550 0.220543474 0.223830539 0.225373627 0.231775240 0.233366566 0.234595856 0.238305502 0.245088308 0.247161345 0.250812999 0.256331904 0.256598527 0.257172328 0.262233612 0.271506430 0.282627618 0.291649033 0.299512296 0.299854162 0.300729807 0.306956938 0.307723751 0.309593907 0.318425714 0.321099358 0.326181043 0.329093325 0.335222963 0.347290341 0.351323283 0.355553135 0.359416418 0.360508058 0.364012357 0.383903935 0.406576488 0.411785514 0.430113594 0.431678272 0.434313335 0.448824131 0.464157118 0.473376684 0.478015140 0.478944173 0.486230348 0.498797744 0.502410402 0.513778558 0.516258120 0.543215036 0.565702053 0.567269548 0.585399131 0.591794645 0.605614300 0.643162098 0.645063586 0.665804984 0.675327668 0.685500404 0.692837829 0.700996900 0.702863235 0.704258383 0.716957308 0.731458468 0.736833813 0.737969714 0.747125786 0.750741482 0.771601676 0.775949330 0.807344248 0.819534268 0.821580599 0.827957349 0.833796040 0.846454639 0.847276947 0.849467590 0.853764898 0.860105032 0.867388049 0.874898460 0.881119463 0.887258456 0.889470568 0.892369956 0.900783855 0.908498745 0.915449704 0.917625777 0.924387040 0.931673446 0.934755701 0.953660054 0.956629394 0.962055758 0.969575590 0.975165537 0.982153999 0.998502418 1.004329153 1.013801728 1.019187517 1.039322845 1.050817047 1.055420731 1.069239482 1.077692709 1.087044570 1.103260245 1.110240625 1.111579385 1.117867699 1.122496757 1.123500526 1.135158579 1.148151151 1.161644144 1.169941857 1.176504471 1.186089187 1.200565769 1.220547904 1.231087508 1.248728084 1.296248970 1.296310813 1.314577756 1.326261555 1.326624746 1.329849145 1.330259606 1.334636201 1.341352212 1.347556364 1.363504387 1.378898396 1.380947827 1.381540953 1.426362848 1.509646505 1.557871262 1.673610154 1.918122551</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">152</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94008535" y3="-0.95430565" z3="-0.66308244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.64875492" y3="-1.9435508" z3="-1.48575267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12779071" y3="-0.98996998" z3="-1.35568963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80363281" y3="1.47991723" z3="-1.03254379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30199533" y3="0.30881547" z3="-0.49067831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68226387" y3="2.72927203" z3="-1.19079573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02065044" y3="2.73404686" z3="-0.83918556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36905718" y3="4.98780929" z3="-0.43504826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82038944" y3="3.84048731" z3="-0.95805236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73347634" y3="5.86220971" z3="-0.2639243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14135628" y3="1.59895794" z3="-1.73106637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12180125" y3="0.34655761" z3="0.19436043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73159255" y3="0.37490612" z3="-0.70057574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60455834" y3="0.73228181" z3="0.19719554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70025242" y3="-0.8669624" z3="-1.56343988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08088975" y3="-2.46410739" z3="-1.36455974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84533204" y3="-5.4753165" z3="-6.34882894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61177954" y3="-5.04071607" z3="-5.37266315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.9933757" y3="-3.90034883" z3="-2.89419631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.58449602" y3="-3.66000091" z3="-5.22437212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36085244" y3="-5.86734268" z3="-4.27471058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06576904" y3="-5.29120551" z3="-3.0452805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28491743" y3="-3.05860681" z3="-3.99188272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78858945" y3="-2.99275574" z3="-6.06543709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40785281" y3="-6.95508497" z3="-4.37028725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90594658" y3="-5.92411639" z3="-2.16809378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62317018" y3="-3.35180786" z3="-1.63945153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36547344" y3="-3.82847553" z3="-0.87404235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71602489" y3="-4.83111526" z3="-1.13377585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36857272" y3="-3.52591769" z3="0.57542669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3540552" y3="-3.04504751" z3="3.33338211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66037765" y3="-4.55886584" z3="1.47458877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08591485" y3="-2.24993861" z3="1.06962256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.07566506" y3="-2.01152796" z3="2.43974624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64440107" y3="-4.32070727" z3="2.84786421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85824323" y3="-5.56827353" z3="1.10070031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10612505" y3="-1.40867991" z3="0.39957119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1570818" y3="-1.00314679" z3="2.7930137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83768877" y3="-5.14391748" z3="3.54112015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33571021" y3="-2.86169566" z3="4.41160707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23834864" y3="-1.72232717" z3="-3.95765147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.41986552" y3="-1.32299691" z3="-3.06072844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35588398" y3="3.68650774" z3="-1.15232308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16062502" y3="-2.95877349" z3="-1.68384593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92558127" y3="-3.1480673" z3="-0.52791329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09388374" y3="-2.28623295" z3="0.42064941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82475711" y3="-0.72736007" z3="0.70691227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.80603947" y3="-0.31206156" z3="-0.82374551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50932262" y3="0.49222448" z3="1.1816678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.94766793" y3="-1.0688762" z3="2.16474396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40785608" y3="-4.36083731" z3="-0.29835318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10505632" y3="-4.61255644" z3="0.91242886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.1680759" y3="-0.09544149" z3="-1.69554504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41219777" y3="0.59359261" z3="-0.63869008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.49432957" y3="-1.13414457" z3="-1.09258456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64930015" y3="0.58245777" z3="0.49391693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.09841936" y3="0.23774976" z3="2.1738983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99039846" y3="1.48491188" z3="1.25888924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.40018109" y3="-0.12625896" z3="2.52279919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.77014341" y3="-1.75918459" z3="1.90744279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.37458142" y3="-1.50671355" z3="3.00168891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04152195" y3="-4.03234003" z3="0.94921629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4801891" y3="-4.36507317" z3="1.78437724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33452588" y3="-5.68654336" z3="0.90064094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28685836" y3="-2.19939406" z3="-0.18119951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13246095" y3="-3.27738865" z3="-1.0644898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47817425" y3="-4.43826735" z3="-0.67013021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98836717" y3="-4.51739917" z3="0.62826872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14578592" y3="-3.4774735" z3="1.53947939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7861106" y3="-2.31652844" z3="1.12466831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48933223" y3="-3.18741991" z3="-2.09373288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32608117" y3="-5.26360549" z3="-1.36647736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2514181" y3="-5.7125568" z3="1.0411026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74178238" y3="-3.57660636" z3="2.54807829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88532283" y3="-1.48049526" z3="1.81887466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50347616" y3="4.0241469" z3="-0.09786936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86909245" y3="3.78913628" z3="-0.1831787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37300122" y3="3.21025984" z3="-1.34288913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55379255" y3="2.89814029" z3="-2.42489917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18962504" y3="3.13800628" z3="-2.32253912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0851666" y3="4.42893271" z3="0.8269524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.539485" y3="4.02306609" z3="0.64408002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80054097" y3="2.88816146" z3="-1.41350038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.98631977" y3="2.45725914" z3="-3.32374055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46544487" y3="2.87019178" z3="-3.15294837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17273233" y3="-5.95267213" z3="2.22715983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74481386" y3="-6.3927714" z3="0.16722515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24766664" y3="2.51194332" z3="-2.47554444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45778632" y3="2.99914598" z3="-0.39561556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68750632" y3="0.17663204" z3="-1.9382001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00512236" y3="1.42158475" z3="-1.8123884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.89547993" y3="0.11372668" z3="-2.68640738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.39505374" y3="1.22756536" z3="-3.31430963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.41527623" y3="-0.8462961" z3="-2.76240926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.32255586" y3="1.16721619" z3="-3.89047585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53124776" y3="2.54860813" z3="-2.5042105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.69367324" y3="2.4543951" z3="-3.23123813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99660058" y3="3.49949898" z3="-2.4603483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.07674885" y3="3.33436043" z3="-3.75563285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56747798" y3="3.9086422" z3="-0.22488417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73771029" y3="5.05721918" z3="-0.06686934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89875362" y3="3.96892246" z3="0.27513324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39005283" y3="5.11812929" z3="0.84638761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53457032" y3="3.08400267" z3="0.20763251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4158791" y3="5.1383326" z3="1.22496375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.27953379" y3="6.23683216" z3="0.51444151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57873124" y3="6.27303516" z3="0.95607925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63419945" y3="7.11490951" z3="0.61552075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98363442" y3="7.18369983" z3="1.40602827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40408213" y3="-3.89202467" z3="-2.85306949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57345302" y3="-4.93314433" z3="-2.53588847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.29301889" y3="-3.56431183" z3="-3.42543306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54559934" y3="-3.87424642" z3="-3.54304991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73148743" y3="-1.56695454" z3="-2.06130858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47986544" y3="-1.08736632" z3="-2.71804434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55375623" y3="-0.91262422" z3="-1.1941869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79176696" y3="-1.60489826" z3="-2.63567994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9401,-.9543,-.6631;6.6488,-1.9436,-1.4858;6.1278,-.99,-1.3557;4.8036,1.4799,-1.0325;4.302,.3088,-.4907;2.6823,2.7293,-1.1908;4.0207,2.734,-.8392;2.3691,4.9878,-.435;1.8204,3.8405,-.9581;1.7335,5.8622,-.2639;2.1414,1.599,-1.7311;3.1218,.3466,.1944;1.7316,.3749,-.7006;.6046,.7323,.1972;1.7003,-.867,-1.5634;1.0809,-2.4641,-1.3646;1.8453,-5.4753,-6.3488;1.6118,-5.0407,-5.3727;.9934,-3.9003,-2.8942;1.5845,-3.66,-5.2244;1.3609,-5.8673,-4.2747;1.0658,-5.2912,-3.0453;1.2849,-3.0586,-3.9919;1.7886,-2.9928,-6.0654;1.4079,-6.9551,-4.3703;.9059,-5.9241,-2.1681;.6232,-3.3518,-1.6395;-.3655,-3.8285,-.874;-.716,-4.8311,-1.1338;-.3686,-3.5259,.5754;-.3541,-3.045,3.3334;-.6604,-4.5589,1.4746;-.0859,-2.2499,1.0696;-.0757,-2.0115,2.4397;-.6444,-4.3207,2.8479;-.8582,-5.5683,1.1007;.1061,-1.4087,.3996;.1571,-1.0031,2.793;-.8377,-5.1439,3.5411;-.3357,-2.8617,4.4116;1.2383,-1.7223,-3.9577;1.4199,-1.323,-3.0607;.3559,3.6865,-1.1523;-2.1606,-2.9588,-1.6838;-2.9256,-3.1481,-.5279;-3.0939,-2.2862,.4206;-3.8248,-.7274,.7069;-4.806,-.3121,-.8237;-2.5093,.4922,1.1817;-4.9477,-1.0689,2.1647;-3.4079,-4.3608,-.2984;-4.1051,-4.6126,.9124;-4.1681,-.0954,-1.6955;-5.4122,.5936,-.6387;-5.4943,-1.1341,-1.0926;-1.6493,.5825,.4939;-2.0984,.2377,2.1739;-2.9904,1.4849,1.2589;-5.4002,-.1263,2.5228;-5.7701,-1.7592,1.9074;-4.3746,-1.5067,3.0017;-5.0415,-4.0323,.9492;-3.4802,-4.3651,1.7844;-4.3345,-5.6865,.9006;4.2869,-2.1994,-.1812;4.1325,-3.2774,-1.0645;3.4782,-4.4383,-.6701;2.9884,-4.5174,.6283;3.1458,-3.4775,1.5395;3.7861,-2.3165,1.1247;4.4893,-3.1874,-2.0937;3.3261,-5.2636,-1.3665;2.2514,-5.7126,1.0411;2.7418,-3.5766,2.5481;3.8853,-1.4805,1.8189;-.5035,4.0241,-.0979;-1.8691,3.7891,-.1832;-2.373,3.2103,-1.3429;-1.5538,2.8981,-2.4249;-.1896,3.138,-2.3225;-.0852,4.4289,.827;-2.5395,4.0231,.6441;-3.8005,2.8882,-1.4135;-1.9863,2.4573,-3.3237;.4654,2.8702,-3.1529;2.1727,-5.9527,2.2272;1.7448,-6.3928,.1672;-4.2477,2.5119,-2.4755;-4.4578,2.9991,-.3956;6.6875,.1766,-1.9382;6.0051,1.4216,-1.8124;7.8955,.1137,-2.6864;8.3951,1.2276,-3.3143;8.4153,-.8463,-2.7624;9.3226,1.1672,-3.8905;6.5312,2.5486,-2.5042;7.6937,2.4544,-3.2312;5.9966,3.4995,-2.4603;8.0767,3.3344,-3.7556;4.5675,3.9086,-.2249;3.7377,5.0572,-.0669;5.8988,3.9689,.2751;6.3901,5.1181,.8464;6.5346,3.084,.2076;7.4159,5.1383,1.225;4.2795,6.2368,.5144;5.5787,6.273,.9561;3.6342,7.1149,.6155;5.9836,7.1837,1.406;-2.4041,-3.892,-2.8531;-2.5735,-4.9331,-2.5359;-3.293,-3.5643,-3.4254;-1.5456,-3.8742,-3.543;-1.7315,-1.567,-2.0613;-2.4799,-1.0874,-2.718;-1.5538,-.9126,-1.1942;-.7918,-1.6049,-2.6357;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662802884197</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005044433613 0.000543036987 0.021874233739 0.005340630471</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056884857 -0.001320420 0.000170349 0.000260966 0.000338555 0.000405095 0.000425071 0.000522176 0.000599535 0.000671486 0.000786396 0.000892862 0.001063011 0.001133064 0.001282012 0.001337816 0.001377011 0.001520900 0.001787570 0.002005793 0.002273009 0.002405506 0.002525962 0.003100715 0.003330533 0.003738195 0.004077136 0.004373149 0.004612754 0.004636260 0.004930009 0.005184518 0.005894311 0.005984404 0.006557263 0.006668524 0.006993523 0.007272267 0.007860090 0.008094012 0.008379154 0.009130708 0.009672487 0.009874567 0.010908991 0.011118850 0.011297811 0.012004616 0.013176973 0.013297918 0.013837174 0.014542023 0.014858822 0.015435144 0.015700786 0.016387909 0.016410384 0.016837449 0.017989277 0.019077615 0.019802456 0.020237213 0.021020696 0.021555442 0.022096297 0.022679711 0.023340721 0.023590178 0.024444048 0.025821097 0.026318567 0.026566153 0.026996337 0.027164218 0.027972306 0.028736063 0.030268394 0.030494012 0.032649931 0.032929048 0.034305556 0.035667372 0.038776317 0.039144003 0.041802045 0.045341192 0.045468559 0.045827862 0.048484912 0.049263144 0.049681997 0.050133604 0.051523483 0.051866440 0.052012581 0.052282960 0.052381335 0.052833437 0.053347223 0.055312313 0.056266429 0.056500748 0.056599334 0.056961853 0.057564352 0.058313292 0.059155677 0.059499536 0.060760146 0.061924647 0.062159915 0.064091055 0.064196238 0.064817259 0.065473516 0.066777951 0.067669070 0.068830220 0.069919086 0.071778086 0.072079540 0.072422827 0.072886874 0.075267976 0.077970910 0.080502148 0.081225395 0.083077683 0.083292628 0.086449325 0.088515982 0.089278702 0.089759393 0.091242274 0.093200599 0.094458558 0.095378098 0.096043999 0.096787508 0.098049044 0.099962648 0.100340921 0.102342734 0.103025409 0.103617938 0.104224783 0.104967499 0.108001742 0.110567989 0.111829461 0.112429822 0.113229178 0.114238464 0.116064566 0.116740046 0.117587237 0.118441537 0.121690434 0.124346640 0.125117512 0.128121071 0.128498475 0.129932105 0.133189804 0.135913356 0.137209531 0.138249792 0.138514033 0.139783304 0.141659876 0.143430819 0.145535440 0.146147591 0.151614571 0.153189781 0.153298184 0.159923802 0.160826708 0.168299262 0.171186867 0.175431755 0.178695127 0.181255058 0.183822183 0.188561893 0.188931585 0.191158426 0.200562605 0.202036926 0.205816604 0.206653064 0.207188669 0.210404842 0.211865410 0.212512637 0.213431707 0.216494197 0.218241990 0.220543731 0.223855602 0.225375475 0.231777456 0.233460226 0.234598160 0.238305662 0.245092130 0.247163996 0.250819188 0.256337521 0.256612819 0.257186736 0.262236615 0.271507445 0.282630016 0.291649939 0.299531023 0.299855882 0.300758133 0.306960066 0.307723771 0.309594420 0.318432195 0.321099463 0.326183617 0.329098369 0.335228804 0.347324529 0.351325835 0.355556709 0.359417964 0.360511992 0.364014677 0.383929188 0.406593110 0.411786638 0.430114952 0.431686704 0.434313922 0.448862333 0.464183225 0.473418293 0.478094706 0.478943194 0.486239949 0.498802997 0.502452838 0.513789845 0.516265379 0.543275822 0.565837737 0.567279524 0.585503734 0.591795029 0.605616081 0.643200690 0.645085221 0.665830197 0.675346892 0.685509770 0.692940467 0.701009033 0.702885003 0.704260406 0.716971070 0.731463367 0.736836435 0.737971520 0.747130378 0.750741495 0.771601830 0.775949683 0.807356906 0.819623562 0.821587231 0.827961051 0.833810469 0.846557254 0.847291015 0.849474644 0.853784480 0.860132049 0.867393433 0.874909953 0.881120174 0.887258582 0.889470890 0.892386253 0.900786281 0.908516553 0.915450049 0.917626923 0.924387235 0.931673465 0.934762936 0.953666059 0.956632434 0.962086421 0.969578332 0.975166534 0.982154546 0.998502441 1.004334193 1.013861725 1.019256555 1.039363944 1.051139064 1.055434236 1.069241563 1.077782645 1.087044788 1.103262275 1.110240647 1.111579475 1.117867789 1.122496757 1.123500601 1.135190670 1.148184043 1.161648261 1.169942669 1.176504906 1.186329986 1.200572910 1.220609557 1.231089142 1.249873368 1.296266425 1.296344555 1.314584487 1.326274741 1.326633105 1.329849733 1.330354550 1.334636181 1.341358562 1.347564340 1.363504572 1.378953922 1.380961286 1.381541197 1.426365036 1.509648650 1.557871284 1.674710497 1.918124335</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">153</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94236823" y3="-0.95379675" z3="-0.65814469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.65340925" y3="-1.94340245" z3="-1.47534698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.13204019" y3="-0.98976211" z3="-1.34726341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80618769" y3="1.48013367" z3="-1.02951942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30371055" y3="0.30927906" z3="-0.48777347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68453717" y3="2.7284883" z3="-1.19293703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02243959" y3="2.73429164" z3="-0.83940235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36982265" y3="4.9887599" z3="-0.44318266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82208841" y3="3.83991616" z3="-0.96371566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73380389" y3="5.8633687" z3="-0.27497157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14459913" y3="1.59740847" z3="-1.73234291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12234683" y3="0.34686337" z3="0.19523894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73343454" y3="0.37409164" z3="-0.70164139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60500421" y3="0.73157204" z3="0.19434149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70363593" y3="-0.86823979" z3="-1.56398517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08018063" y3="-2.46406839" z3="-1.36553065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.8367055" y3="-5.46727762" z3="-6.35578857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60455667" y3="-5.0339967" z3="-5.37873711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98991551" y3="-3.89714572" z3="-2.89797931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57656208" y3="-3.65348511" z3="-5.22875846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35614759" y3="-5.86209858" z3="-4.28147204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06270345" y3="-5.28762955" z3="-3.05089751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27893773" y3="-3.05384961" z3="-3.99501397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.7786173" y3="-2.98514845" z3="-6.0693946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40376648" y3="-6.94964171" z3="-4.37846146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90406103" y3="-5.92158542" z3="-2.17450041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62112871" y3="-3.35022213" z3="-1.64213638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36633203" y3="-3.8288427" z3="-0.87583983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71781047" y3="-4.83037417" z3="-1.13744926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36881997" y3="-3.52767016" z3="0.57354007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35451761" y3="-3.04827219" z3="3.33219963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66155792" y3="-4.56069579" z3="1.47256037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08917386" y3="-2.24850658" z3="1.06709905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.07950159" y3="-2.01130095" z3="2.43718531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64600956" y3="-4.32339721" z3="2.84594177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86127178" y3="-5.5685596" z3="1.09737038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1087124" y3="-1.40941406" z3="0.40080763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15380661" y3="-1.00297217" z3="2.79085274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84198872" y3="-5.1464955" z3="3.53760756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33625083" y3="-2.86504005" z3="4.4105772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23138925" y3="-1.71770643" z3="-3.95846451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.41654213" y3="-1.3203161" z3="-3.0615983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35779967" y3="3.68440221" z3="-1.15839877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16283136" y3="-2.95663296" z3="-1.68200412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92639234" y3="-3.14883876" z3="-0.52592736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09500679" y3="-2.28849654" z3="0.42412754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82461209" y3="-0.73015419" z3="0.71405308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.81375561" y3="-0.31633249" z3="-0.81188333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50871086" y3="0.49158707" z3="1.18291133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.93936039" y3="-1.07282872" z3="2.17798174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40833712" y3="-4.36216249" z3="-0.29918477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1066608" y3="-4.61641892" z3="0.91011042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.18018281" y3="-0.10591198" z3="-1.68842236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41484354" y3="0.59230886" z3="-0.6261828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.5065946" y3="-1.13679561" z3="-1.07315807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65017744" y3="0.58115219" z3="0.49293231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.09505205" y3="0.23988998" z3="2.17501521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99103873" y3="1.48372639" z3="1.25967176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.3917251" y3="-0.1311423" z3="2.53832032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.76185994" y3="-1.76490473" z3="1.92563604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.36080047" y3="-1.50929814" z3="3.01203341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0449567" y3="-4.03800772" z3="0.94466794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48409305" y3="-4.36786913" z3="1.78380094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33373302" y3="-5.69120426" z3="0.89684279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28787967" y3="-2.19892319" z3="-0.17815387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13310998" y3="-3.27549777" z3="-1.06318828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47891965" y3="-4.4372766" z3="-0.67049407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98924218" y3="-4.51839677" z3="0.62791121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14548333" y3="-3.4788622" z3="1.5402699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78638892" y3="-2.31748414" z3="1.12721976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4895913" y3="-3.18357951" z3="-2.092366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32575263" y3="-5.26124672" z3="-1.36823013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24959044" y3="-5.71271187" z3="1.03745923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74009854" y3="-3.57842197" z3="2.54824771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88518762" y3="-1.48199497" z3="1.82230338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.5021519" y3="4.02290516" z3="-0.10467405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8674806" y3="3.785968" z3="-0.18983424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37026482" y3="3.203705" z3="-1.34813982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55054282" y3="2.8907747" z3="-2.42956465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18676617" y3="3.13303416" z3="-2.3276546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08462025" y3="4.43026518" z3="0.81920245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53829829" y3="4.02052218" z3="0.63712792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79740078" y3="2.87945988" z3="-1.41835334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.98228833" y3="2.44733666" z3="-3.32747545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46871278" y3="2.86483335" z3="-3.15770275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1508581" y3="-5.94026344" z3="2.21932353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75716857" y3="-6.40240184" z3="0.16381382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24341139" y3="2.49806454" z3="-2.47902333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45549087" y3="2.9941658" z3="-0.40138347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.69315318" y3="0.17661465" z3="-1.92882201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00968414" y3="1.42133795" z3="-1.80638901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.90359144" y3="0.1134996" z3="-2.67300478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.40449124" y3="1.2268443" z3="-3.30069685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.4242629" y3="-0.84630035" z3="-2.7459918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.3339736" y3="1.16638161" z3="-3.87364681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53708703" y3="2.54766689" z3="-2.49841528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.70183163" y3="2.45323336" z3="-3.22169589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00164656" y3="3.49826698" z3="-2.45768338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08582217" y3="3.33272162" z3="-3.74622161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56811574" y3="3.91062803" z3="-0.22727393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73806178" y3="5.05959341" z3="-0.073811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89868509" y3="3.97268021" z3="0.27443123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38935297" y3="5.12392398" z3="0.84217261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53458525" y3="3.08757544" z3="0.21084838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41477571" y3="5.14548065" z3="1.22182061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.27914929" y3="6.24127431" z3="0.50408639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57794173" y3="6.2792174" z3="0.9468072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63364423" y3="7.11965346" z3="0.60144876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98241733" y3="7.19158614" z3="1.39374068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40776059" y3="-3.88817149" z3="-2.85280763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57581416" y3="-4.92948893" z3="-2.53913961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.29766392" y3="-3.55958066" z3="-3.42209093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.55104772" y3="-3.86705126" z3="-3.54502482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73466068" y3="-1.56320667" z3="-2.05839518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.48427262" y3="-1.08201056" z3="-2.71290173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55423278" y3="-0.91027504" z3="-1.1909188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7964266" y3="-1.60072914" z3="-2.63512128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9424,-.9538,-.6581;6.6534,-1.9434,-1.4753;6.132,-.9898,-1.3473;4.8062,1.4801,-1.0295;4.3037,.3093,-.4878;2.6845,2.7285,-1.1929;4.0224,2.7343,-.8394;2.3698,4.9888,-.4432;1.8221,3.8399,-.9637;1.7338,5.8634,-.275;2.1446,1.5974,-1.7323;3.1223,.3469,.1952;1.7334,.3741,-.7016;.605,.7316,.1943;1.7036,-.8682,-1.564;1.0802,-2.4641,-1.3655;1.8367,-5.4673,-6.3558;1.6046,-5.034,-5.3787;.9899,-3.8971,-2.898;1.5766,-3.6535,-5.2288;1.3561,-5.8621,-4.2815;1.0627,-5.2876,-3.0509;1.2789,-3.0538,-3.995;1.7786,-2.9851,-6.0694;1.4038,-6.9496,-4.3785;.9041,-5.9216,-2.1745;.6211,-3.3502,-1.6421;-.3663,-3.8288,-.8758;-.7178,-4.8304,-1.1374;-.3688,-3.5277,.5735;-.3545,-3.0483,3.3322;-.6616,-4.5607,1.4726;-.0892,-2.2485,1.0671;-.0795,-2.0113,2.4372;-.646,-4.3234,2.8459;-.8613,-5.5686,1.0974;.1087,-1.4094,.4008;.1538,-1.003,2.7909;-.842,-5.1465,3.5376;-.3363,-2.865,4.4106;1.2314,-1.7177,-3.9585;1.4165,-1.3203,-3.0616;.3578,3.6844,-1.1584;-2.1628,-2.9566,-1.682;-2.9264,-3.1488,-.5259;-3.095,-2.2885,.4241;-3.8246,-.7302,.7141;-4.8138,-.3163,-.8119;-2.5087,.4916,1.1829;-4.9394,-1.0728,2.178;-3.4083,-4.3622,-.2992;-4.1067,-4.6164,.9101;-4.1802,-.1059,-1.6884;-5.4148,.5923,-.6262;-5.5066,-1.1368,-1.0732;-1.6502,.5812,.4929;-2.0951,.2399,2.175;-2.991,1.4837,1.2597;-5.3917,-.1311,2.5383;-5.7619,-1.7649,1.9256;-4.3608,-1.5093,3.012;-5.045,-4.038,.9447;-3.4841,-4.3679,1.7838;-4.3337,-5.6912,.8968;4.2879,-2.1989,-.1782;4.1331,-3.2755,-1.0632;3.4789,-4.4373,-.6705;2.9892,-4.5184,.6279;3.1455,-3.4789,1.5403;3.7864,-2.3175,1.1272;4.4896,-3.1836,-2.0924;3.3258,-5.2612,-1.3682;2.2496,-5.7127,1.0375;2.7401,-3.5784,2.5482;3.8852,-1.482,1.8223;-.5022,4.0229,-.1047;-1.8675,3.786,-.1898;-2.3703,3.2037,-1.3481;-1.5505,2.8908,-2.4296;-.1868,3.133,-2.3277;-.0846,4.4303,.8192;-2.5383,4.0205,.6371;-3.7974,2.8795,-1.4184;-1.9823,2.4473,-3.3275;.4687,2.8648,-3.1577;2.1509,-5.9403,2.2193;1.7572,-6.4024,.1638;-4.2434,2.4981,-2.479;-4.4555,2.9942,-.4014;6.6932,.1766,-1.9288;6.0097,1.4213,-1.8064;7.9036,.1135,-2.673;8.4045,1.2268,-3.3007;8.4243,-.8463,-2.746;9.334,1.1664,-3.8736;6.5371,2.5477,-2.4984;7.7018,2.4532,-3.2217;6.0016,3.4983,-2.4577;8.0858,3.3327,-3.7462;4.5681,3.9106,-.2273;3.7381,5.0596,-.0738;5.8987,3.9727,.2744;6.3894,5.1239,.8422;6.5346,3.0876,.2108;7.4148,5.1455,1.2218;4.2791,6.2413,.5041;5.5779,6.2792,.9468;3.6336,7.1197,.6014;5.9824,7.1916,1.3937;-2.4078,-3.8882,-2.8528;-2.5758,-4.9295,-2.5391;-3.2977,-3.5596,-3.4221;-1.551,-3.8671,-3.545;-1.7347,-1.5632,-2.0584;-2.4843,-1.082,-2.7129;-1.5542,-.9103,-1.1909;-.7964,-1.6007,-2.6351;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662782730305</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006760301049 0.000630410292 0.018748683166 0.005341181049</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885464 -0.001351976 0.000167881 0.000253161 0.000338843 0.000406545 0.000425085 0.000519030 0.000599585 0.000671461 0.000786528 0.000892857 0.001063311 0.001133034 0.001282021 0.001341717 0.001375926 0.001520816 0.001788266 0.002015349 0.002273989 0.002404082 0.002529769 0.003101058 0.003335247 0.003738673 0.004086214 0.004386815 0.004620477 0.004664629 0.004947427 0.005191226 0.005895009 0.005994173 0.006599619 0.006737597 0.007006163 0.007280306 0.008088346 0.008260229 0.008623594 0.009127417 0.009673789 0.009874561 0.010931696 0.011117273 0.011305255 0.012004859 0.013177443 0.013321771 0.013840158 0.014542324 0.014859606 0.015444817 0.015710155 0.016393459 0.016431031 0.016837453 0.018052360 0.019076752 0.019802191 0.020241190 0.021020822 0.021555867 0.022096555 0.022680146 0.023340842 0.023590548 0.024445463 0.025821183 0.026321151 0.026566118 0.027001386 0.027164270 0.027980575 0.028751693 0.030307181 0.030505698 0.032654232 0.032931723 0.034307597 0.035668717 0.038780535 0.039146696 0.041802417 0.045345187 0.045468780 0.045829842 0.048484938 0.049273268 0.049682237 0.050134612 0.051523467 0.051869602 0.052012606 0.052282973 0.052381497 0.052877981 0.053347555 0.055312965 0.056268904 0.056501231 0.056602559 0.056962744 0.057564499 0.058314948 0.059155733 0.059499670 0.060760179 0.061927407 0.062159846 0.064100481 0.064199497 0.064817535 0.065474525 0.066782325 0.067669131 0.068830389 0.069917507 0.071777485 0.072080078 0.072427099 0.072887722 0.075268288 0.077976485 0.080502323 0.081227284 0.083078760 0.083292758 0.086449182 0.088516931 0.089278830 0.089759478 0.091242350 0.093201005 0.094458633 0.095385098 0.096044160 0.096787713 0.098048810 0.099964177 0.100341408 0.102360355 0.103104652 0.103665537 0.104427754 0.104975652 0.108017422 0.110569224 0.111829680 0.112449779 0.113247324 0.114241593 0.116065111 0.116741742 0.117598279 0.118447618 0.121711119 0.124374644 0.125180442 0.128162129 0.128518329 0.129933667 0.133189860 0.135925567 0.137222673 0.138252939 0.138519377 0.139783855 0.141667895 0.143434250 0.145535920 0.146158586 0.151615841 0.153191432 0.153299094 0.159924122 0.160828959 0.168306645 0.171201061 0.175480655 0.178696045 0.181255060 0.183822948 0.188561938 0.189006813 0.191158391 0.200562687 0.202041086 0.205816830 0.206686237 0.207189867 0.210422966 0.211866194 0.212512366 0.213434421 0.216494381 0.218242413 0.220544972 0.223891059 0.225379792 0.231778952 0.233515643 0.234600187 0.238305870 0.245092152 0.247183872 0.250821129 0.256342770 0.256632428 0.257206490 0.262239672 0.271508585 0.282637538 0.291652760 0.299532854 0.299861081 0.300786649 0.306966546 0.307723789 0.309594664 0.318433136 0.321100371 0.326193753 0.329109957 0.335238643 0.347379322 0.351340970 0.355560820 0.359419258 0.360516805 0.364017458 0.383967602 0.406614255 0.411788135 0.430115111 0.431685569 0.434320826 0.448895151 0.464227002 0.473454362 0.478213427 0.478952514 0.486275107 0.498804169 0.502486109 0.513819562 0.516273584 0.543374770 0.566086990 0.567301650 0.585561776 0.591796251 0.605618606 0.643200138 0.645113361 0.665856463 0.675387496 0.685514753 0.693068773 0.701011920 0.702939146 0.704262726 0.716991775 0.731463861 0.736837386 0.737973857 0.747130194 0.750741506 0.771601938 0.775950707 0.807388890 0.819690535 0.821601863 0.827962841 0.833828764 0.846597647 0.847292079 0.849474513 0.853783994 0.860139863 0.867402287 0.874928094 0.881120400 0.887259652 0.889477373 0.892393285 0.900790036 0.908522605 0.915451510 0.917631782 0.924388097 0.931674307 0.934764283 0.953671387 0.956635392 0.962091353 0.969582838 0.975168618 0.982156823 0.998502459 1.004339354 1.013909528 1.019314054 1.039386282 1.051453642 1.055455220 1.069241733 1.077807374 1.087045270 1.103262634 1.110240735 1.111579633 1.117869989 1.122496762 1.123500759 1.135213267 1.148206825 1.161648397 1.169944531 1.176507270 1.186427641 1.200584614 1.220625837 1.231089227 1.251854966 1.296270550 1.296382790 1.314595631 1.326290883 1.326648463 1.329853343 1.330493372 1.334636157 1.341373814 1.347593953 1.363508855 1.379062228 1.380975206 1.381543452 1.426367852 1.509650321 1.557871277 1.676703974 1.918124823</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">154</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.94415254" y3="-0.95317402" z3="-0.65213172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.65733061" y3="-1.94364482" z3="-1.4636185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.13569718" y3="-0.98983782" z3="-1.33789052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80853818" y3="1.48030103" z3="-1.02679425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30509663" y3="0.31007933" z3="-0.48446325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68686515" y3="2.72813347" z3="-1.19576505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02431074" y3="2.7347622" z3="-0.84045082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3709365" y3="4.99044248" z3="-0.4522726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82395804" y3="3.83999325" z3="-0.97010179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73458114" y3="5.86541834" z3="-0.28697737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14763143" y3="1.59619714" z3="-1.73388658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12253415" y3="0.34823112" z3="0.19647218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7350683" y3="0.37397978" z3="-0.70256013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60490388" y3="0.73146137" z3="0.19122972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70721636" y3="-0.86887197" z3="-1.5642328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.07979788" y3="-2.46182693" z3="-1.36687938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.82808493" y3="-5.45782504" z3="-6.36291347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.59786764" y3="-5.02602609" z3="-5.38468584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.98754789" y3="-3.89294235" z3="-2.90093525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.56909471" y3="-3.6457042" z3="-5.23288115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35283589" y3="-5.85575349" z3="-4.28776621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.06161412" y3="-5.28325519" z3="-3.05561647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27370446" y3="-3.04805131" z3="-3.99762777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.76866123" y3="-2.97607351" z3="-6.0731585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40121168" y3="-6.94312714" z3="-4.38641046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90566523" y3="-5.91863047" z3="-2.17949611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.61987407" y3="-3.34753935" z3="-1.64402329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36752995" y3="-3.8262562" z3="-0.8779723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71832995" y3="-4.8284096" z3="-1.13926502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37007951" y3="-3.52538434" z3="0.57183049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35859981" y3="-3.04971188" z3="3.33033796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66572571" y3="-4.55875803" z3="1.46854263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08698853" y3="-2.24975331" z3="1.06811699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.07840242" y3="-2.01419419" z3="2.43856663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65145807" y3="-4.32318775" z3="2.84202644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86572617" y3="-5.56630774" z3="1.09211984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10873018" y3="-1.40815843" z3="0.40079873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1559712" y3="-1.00757455" z3="2.7944107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84672993" y3="-5.1475761" z3="3.53388299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34040486" y3="-2.86904073" z3="4.40897618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.22500901" y3="-1.71190834" z3="-3.95906392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.41363364" y3="-1.31617467" z3="-3.06203877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35985948" y3="3.68277233" z3="-1.16482008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16442831" y3="-2.95500968" z3="-1.68243348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92854168" y3="-3.14894341" z3="-0.52704933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0964008" y3="-2.29089452" z3="0.42510612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82506075" y3="-0.73430969" z3="0.72153604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.82163069" y3="-0.32071739" z3="-0.79960334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.50865755" y3="0.48917145" z3="1.18518038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.93155696" y3="-1.07999756" z3="2.19061722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41130517" y3="-4.36218623" z3="-0.30344336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10899227" y3="-4.62010014" z3="0.9061299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.19258211" y3="-0.11486202" z3="-1.68037742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41762766" y3="0.5909545" z3="-0.61274841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.51946966" y3="-1.13900905" z3="-1.05440939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65241388" y3="0.57920986" z3="0.49319934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.09243049" y3="0.23895319" z3="2.17644357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99129782" y3="1.48133733" z3="1.26165619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.38398471" y3="-0.13957432" z3="2.5536345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.75378661" y3="-1.77401858" z3="1.94232952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.34741489" y3="-1.51499906" z3="3.02124759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04563143" y3="-4.0404631" z3="0.94534354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4848196" y3="-4.37697363" z3="1.77943533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33880746" y3="-5.69306182" z3="0.88828485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28776829" y3="-2.19803784" z3="-0.17396095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13291206" y3="-3.27333689" z3="-1.06055895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47611582" y3="-4.43419447" z3="-0.67052251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98426982" y3="-4.51587625" z3="0.62695431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14176958" y3="-3.47862445" z3="1.54124508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78450871" y3="-2.31757218" z3="1.13063138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4916232" y3="-3.18097727" z3="-2.08894989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32410414" y3="-5.25790043" z3="-1.3692066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24653965" y3="-5.71225836" z3="1.03593408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73622416" y3="-3.5800871" z3="2.54898455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88395782" y3="-1.48348774" z3="1.8271158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50023015" y3="4.02177896" z3="-0.11140735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86511746" y3="3.78217803" z3="-0.19529985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36743663" y3="3.1971566" z3="-1.35260634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.54766249" y3="2.88382937" z3="-2.43398231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18422228" y3="3.12859942" z3="-2.33299108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08290408" y3="4.43118948" z3="0.81179452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53597279" y3="4.01698339" z3="0.63154401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79420305" y3="2.87081061" z3="-1.42187585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.97911553" y3="2.43809331" z3="-3.33094405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.47152825" y3="2.85975204" z3="-3.16225758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16279232" y3="-5.95322583" z3="2.22188532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74572002" y3="-6.39361731" z3="0.15975692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.23959073" y3="2.48436547" z3="-2.48098059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45264708" y3="2.98923182" z3="-0.40553643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.69824575" y3="0.1759096" z3="-1.91925959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.01392146" y3="1.42053278" z3="-1.80076666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.91093976" y3="0.11205598" z3="-2.65966866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.41322245" y3="1.22454327" z3="-3.28776407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.43226225" y3="-0.84764242" z3="-2.72935199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.34450718" y3="1.16355589" z3="-3.85770072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.54268593" y3="2.5457892" z3="-2.49353738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.70960152" y3="2.45066284" z3="-3.21319396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00667696" y3="3.49619743" z3="-2.45622425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.09461543" y3="3.32941693" z3="-3.73822119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56910387" y3="3.91293746" z3="-0.23088537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73890623" y3="5.06249587" z3="-0.08199444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89909002" y3="3.97659964" z3="0.2722067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.38935978" y3="5.12990429" z3="0.83623491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53495792" y3="3.09114569" z3="0.21247369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41445807" y3="5.1526994" z3="1.2167211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.27951258" y3="6.24623276" z3="0.4923167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57796312" y3="6.28574221" z3="0.93594699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63393285" y3="7.12503752" z3="0.58607685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98214913" y3="7.19979333" z3="1.37985298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40904272" y3="-3.88501724" z3="-2.85476279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57578755" y3="-4.92729237" z3="-2.54253001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.29960233" y3="-3.55628687" z3="-3.42287111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.55270086" y3="-3.86251423" z3="-3.54699578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73797501" y3="-1.56054779" z3="-2.05579602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.48938864" y3="-1.07832127" z3="-2.70721253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55668446" y3="-0.90971062" z3="-1.1867084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.80016763" y3="-1.59562354" z3="-2.63388134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9442,-.9532,-.6521;6.6573,-1.9436,-1.4636;6.1357,-.9898,-1.3379;4.8085,1.4803,-1.0268;4.3051,.3101,-.4845;2.6869,2.7281,-1.1958;4.0243,2.7348,-.8405;2.3709,4.9904,-.4523;1.824,3.84,-.9701;1.7346,5.8654,-.287;2.1476,1.5962,-1.7339;3.1225,.3482,.1965;1.7351,.374,-.7026;.6049,.7315,.1912;1.7072,-.8689,-1.5642;1.0798,-2.4618,-1.3669;1.8281,-5.4578,-6.3629;1.5979,-5.026,-5.3847;.9875,-3.8929,-2.9009;1.5691,-3.6457,-5.2329;1.3528,-5.8558,-4.2878;1.0616,-5.2833,-3.0556;1.2737,-3.0481,-3.9976;1.7687,-2.9761,-6.0732;1.4012,-6.9431,-4.3864;.9057,-5.9186,-2.1795;.6199,-3.3475,-1.644;-.3675,-3.8263,-.878;-.7183,-4.8284,-1.1393;-.3701,-3.5254,.5718;-.3586,-3.0497,3.3303;-.6657,-4.5588,1.4685;-.087,-2.2498,1.0681;-.0784,-2.0142,2.4386;-.6515,-4.3232,2.842;-.8657,-5.5663,1.0921;.1087,-1.4082,.4008;.156,-1.0076,2.7944;-.8467,-5.1476,3.5339;-.3404,-2.869,4.409;1.225,-1.7119,-3.9591;1.4136,-1.3162,-3.062;.3599,3.6828,-1.1648;-2.1644,-2.955,-1.6824;-2.9285,-3.1489,-.527;-3.0964,-2.2909,.4251;-3.8251,-.7343,.7215;-4.8216,-.3207,-.7996;-2.5087,.4892,1.1852;-4.9316,-1.08,2.1906;-3.4113,-4.3622,-.3034;-4.109,-4.6201,.9061;-4.1926,-.1149,-1.6804;-5.4176,.591,-.6127;-5.5195,-1.139,-1.0544;-1.6524,.5792,.4932;-2.0924,.239,2.1764;-2.9913,1.4813,1.2617;-5.384,-.1396,2.5536;-5.7538,-1.774,1.9423;-4.3474,-1.515,3.0212;-5.0456,-4.0405,.9453;-3.4848,-4.377,1.7794;-4.3388,-5.6931,.8883;4.2878,-2.198,-.174;4.1329,-3.2733,-1.0606;3.4761,-4.4342,-.6705;2.9843,-4.5159,.627;3.1418,-3.4786,1.5412;3.7845,-2.3176,1.1306;4.4916,-3.181,-2.0889;3.3241,-5.2579,-1.3692;2.2465,-5.7123,1.0359;2.7362,-3.5801,2.549;3.884,-1.4835,1.8271;-.5002,4.0218,-.1114;-1.8651,3.7822,-.1953;-2.3674,3.1972,-1.3526;-1.5477,2.8838,-2.434;-.1842,3.1286,-2.333;-.0829,4.4312,.8118;-2.536,4.017,.6315;-3.7942,2.8708,-1.4219;-1.9791,2.4381,-3.3309;.4715,2.8598,-3.1623;2.1628,-5.9532,2.2219;1.7457,-6.3936,.1598;-4.2396,2.4844,-2.481;-4.4526,2.9892,-.4055;6.6982,.1759,-1.9193;6.0139,1.4205,-1.8008;7.9109,.1121,-2.6597;8.4132,1.2245,-3.2878;8.4323,-.8476,-2.7294;9.3445,1.1636,-3.8577;6.5427,2.5458,-2.4935;7.7096,2.4507,-3.2132;6.0067,3.4962,-2.4562;8.0946,3.3294,-3.7382;4.5691,3.9129,-.2309;3.7389,5.0625,-.082;5.8991,3.9766,.2722;6.3894,5.1299,.8362;6.535,3.0911,.2125;7.4145,5.1527,1.2167;4.2795,6.2462,.4923;5.578,6.2857,.9359;3.6339,7.125,.5861;5.9821,7.1998,1.3799;-2.409,-3.885,-2.8548;-2.5758,-4.9273,-2.5425;-3.2996,-3.5563,-3.4229;-1.5527,-3.8625,-3.547;-1.738,-1.5605,-2.0558;-2.4894,-1.0783,-2.7072;-1.5567,-.9097,-1.1867;-.8002,-1.5956,-2.6339;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662773696758</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006285869859 0.000549538053 0.020708128151 0.005343977979</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885444 -0.000947811 0.000160585 0.000248294 0.000338675 0.000403953 0.000425212 0.000517263 0.000599723 0.000671575 0.000786614 0.000892982 0.001065689 0.001133048 0.001282554 0.001342736 0.001376193 0.001520844 0.001788233 0.002020810 0.002273954 0.002405068 0.002529583 0.003103099 0.003334875 0.003738665 0.004093046 0.004389704 0.004620599 0.004678573 0.004952009 0.005192865 0.005895302 0.006006770 0.006600067 0.006783458 0.007006097 0.007279799 0.008090934 0.008302712 0.008952417 0.009146312 0.009673643 0.009877505 0.010945951 0.011117091 0.011307158 0.012005121 0.013177364 0.013349457 0.013841427 0.014543182 0.014859970 0.015450924 0.015715010 0.016393226 0.016451866 0.016837497 0.018112621 0.019087268 0.019804402 0.020247818 0.021020841 0.021555765 0.022096698 0.022680489 0.023341395 0.023590529 0.024447529 0.025821414 0.026323925 0.026566100 0.027002048 0.027165243 0.027984264 0.028755945 0.030329565 0.030532078 0.032654757 0.032941081 0.034311776 0.035674094 0.038787066 0.039150363 0.041804170 0.045347968 0.045471417 0.045828644 0.048484946 0.049287765 0.049682254 0.050135723 0.051523497 0.051876986 0.052013005 0.052282999 0.052381508 0.052911343 0.053347545 0.055314131 0.056270179 0.056502470 0.056605246 0.056963881 0.057564498 0.058315278 0.059156055 0.059500845 0.060761638 0.061927388 0.062159901 0.064099918 0.064199579 0.064818488 0.065476011 0.066786145 0.067669251 0.068830967 0.069928551 0.071777213 0.072085047 0.072436892 0.072888097 0.075269230 0.077980543 0.080502482 0.081236525 0.083083759 0.083292826 0.086449444 0.088521055 0.089280842 0.089759945 0.091242427 0.093201486 0.094459887 0.095391406 0.096051378 0.096787740 0.098054226 0.099964506 0.100341728 0.102374662 0.103138525 0.103690575 0.104544727 0.105005427 0.108038498 0.110569471 0.111835423 0.112460591 0.113252751 0.114246255 0.116066645 0.116742679 0.117600370 0.118451946 0.121731414 0.124395764 0.125242686 0.128204044 0.128534028 0.129934103 0.133190159 0.135935445 0.137235410 0.138254674 0.138523590 0.139786463 0.141672381 0.143438996 0.145538067 0.146160626 0.151618569 0.153199869 0.153301616 0.159924783 0.160829561 0.168319661 0.171219019 0.175486905 0.178701186 0.181255519 0.183822964 0.188563948 0.189031173 0.191165724 0.200563435 0.202043933 0.205820129 0.206723987 0.207192363 0.210426482 0.211865753 0.212512339 0.213435596 0.216494456 0.218242440 0.220545466 0.223907499 0.225384039 0.231779750 0.233523358 0.234601825 0.238306147 0.245101116 0.247200888 0.250821031 0.256350219 0.256654985 0.257223604 0.262242301 0.271509459 0.282644052 0.291659006 0.299532900 0.299869710 0.300797723 0.306971745 0.307723879 0.309595074 0.318434102 0.321102826 0.326210892 0.329117259 0.335245132 0.347435566 0.351376081 0.355563446 0.359439683 0.360522558 0.364019452 0.383994168 0.406629348 0.411791573 0.430116540 0.431692752 0.434320734 0.448910982 0.464263081 0.473480669 0.478296088 0.478970548 0.486311944 0.498804252 0.502501120 0.513848635 0.516285611 0.543458874 0.566312929 0.567332721 0.585572248 0.591797216 0.605620736 0.643238305 0.645131517 0.665874974 0.675423427 0.685519033 0.693192066 0.701017597 0.703009135 0.704264099 0.717013967 0.731465505 0.736837695 0.737975890 0.747131907 0.750741521 0.771602058 0.775951798 0.807407499 0.819725137 0.821617183 0.827963314 0.833842860 0.846597432 0.847292924 0.849479478 0.853791682 0.860143818 0.867411802 0.874944480 0.881132670 0.887259628 0.889503305 0.892393156 0.900792153 0.908526321 0.915453267 0.917632620 0.924388793 0.931678183 0.934780396 0.953679302 0.956635538 0.962092088 0.969586511 0.975172887 0.982160899 0.998502957 1.004339243 1.013940603 1.019344224 1.039392620 1.051657561 1.055473493 1.069241797 1.077809119 1.087049516 1.103262682 1.110240914 1.111579635 1.117875251 1.122496761 1.123501034 1.135226572 1.148211219 1.161648745 1.169946342 1.176508814 1.186440820 1.200597372 1.220625905 1.231093192 1.253668165 1.296271062 1.296403638 1.314606542 1.326305118 1.326663287 1.329854592 1.330615069 1.334636565 1.341378179 1.347596879 1.363533657 1.379184502 1.381003639 1.381547143 1.426367970 1.509652010 1.557871277 1.678789281 1.918125261</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">155</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9417728" y3="-0.95376652" z3="-0.65738823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.65252194" y3="-1.94383955" z3="-1.47455342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1312954" y3="-0.99009599" z3="-1.34672652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80584707" y3="1.48003659" z3="-1.02970994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30330438" y3="0.30947427" z3="-0.48739837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68443494" y3="2.72882839" z3="-1.19302869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0224181" y3="2.73442549" z3="-0.8398492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37030846" y3="4.9893656" z3="-0.44362075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8222505" y3="3.84048725" z3="-0.96378606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73446879" y3="5.86412265" z3="-0.27534698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.14411636" y3="1.59774411" z3="-1.73202261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12202227" y3="0.34756618" z3="0.19574288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73309915" y3="0.37459762" z3="-0.70109732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60456648" y3="0.73193091" z3="0.19479871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.7034828" y3="-0.86776438" z3="-1.56337929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08062885" y3="-2.46307842" z3="-1.36529645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.83788001" y3="-5.46586871" z3="-6.35580841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.60576529" y3="-5.03278235" z3="-5.37862973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99093519" y3="-3.89637449" z3="-2.89757306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.57746654" y3="-3.65228908" z3="-5.22848173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.35774274" y3="-5.8610855" z3="-4.28134298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.064291" y3="-5.28689513" z3="-3.0505869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.27975026" y3="-3.0529051" z3="-3.99461119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.77926943" y3="-2.9837684" z3="-6.06907526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.40562022" y3="-6.94861359" z3="-4.3785304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.90616642" y3="-5.92110478" z3="-2.17411118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62180394" y3="-3.34953977" z3="-1.64175202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36590713" y3="-3.82788151" z3="-0.87586831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71674527" y3="-4.8299851" z3="-1.13686779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36906071" y3="-3.52619641" z3="0.57363448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35628241" y3="-3.04791669" z3="3.33201816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66258433" y3="-4.55934714" z3="1.47172735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.08792793" y3="-2.24905952" z3="1.06839379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.07877245" y3="-2.01223158" z3="2.43862928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64766286" y3="-4.32251586" z3="2.84510016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86167531" y3="-5.56744928" z3="1.09632198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1076235" y3="-1.4084757" z3="0.40086632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15445758" y3="-1.0045876" z3="2.79310102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84243109" y3="-5.14623372" z3="3.53728541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.33806724" y3="-2.86576436" z3="4.41047454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23187566" y3="-1.71674061" z3="-3.95802539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4167563" y3="-1.3193337" z3="-3.06102945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35789655" y3="3.68499287" z3="-1.15796061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.16244718" y3="-2.95698374" z3="-1.6829635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92679519" y3="-3.14886767" z3="-0.52737342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09561903" y3="-2.28867829" z3="0.4227104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82517469" y3="-0.73098805" z3="0.71375937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.8133397" y3="-0.31607494" z3="-0.81246036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5093288" y3="0.49032565" z3="1.1838955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.94076389" y3="-1.07464625" z3="2.17650319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40890737" y3="-4.3620059" z3="-0.30089256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10662589" y3="-4.61699721" z3="0.9090075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.17942726" y3="-0.10422589" z3="-1.68823982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41480025" y3="0.59216082" z3="-0.62618373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.50578081" y3="-1.13636646" z3="-1.07511752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65079507" y3="0.58027298" z3="0.49440147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.09631393" y3="0.23794443" z3="2.17596191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99121894" y3="1.4827484" z3="1.26066295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.39334815" y3="-0.1332017" z3="2.53694687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.76302041" y3="-1.76666308" z3="1.9230708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.36277929" y3="-1.51128966" z3="3.01060726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.043774" y3="-4.03769046" z3="0.94609736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48277774" y3="-4.3708611" z3="1.78200108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33545168" y3="-5.69071526" z3="0.89431187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28711027" y3="-2.19872333" z3="-0.17716132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13270143" y3="-3.27554493" z3="-1.06196201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4777966" y3="-4.43676214" z3="-0.66946839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9871436" y3="-4.51720041" z3="0.62855117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14393412" y3="-3.47811631" z3="1.54101491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78516543" y3="-2.31699206" z3="1.12808834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49014865" y3="-3.18428119" z3="-2.09088004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32571859" y3="-5.26134837" z3="-1.36689494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24930047" y3="-5.71265614" z3="1.03913215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73888412" y3="-3.57806664" z3="2.54910008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88420554" y3="-1.48173027" z3="1.8232692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.501559" y3="4.02298426" z3="-0.10369999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86685544" y3="3.78577102" z3="-0.18808719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37021941" y3="3.20413949" z3="-1.34658141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55100632" y3="2.89177119" z3="-2.4285945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18717051" y3="3.13403368" z3="-2.32717552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.08355277" y3="4.42989338" z3="0.82024416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53726768" y3="4.01983759" z3="0.63930992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79743896" y3="2.88007855" z3="-1.41636857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.98321626" y3="2.44876966" z3="-3.32652525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46800687" y3="2.86606493" z3="-3.15733333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16193672" y3="-5.94857801" z3="2.22386425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75004254" y3="-6.39697813" z3="0.16461949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24400145" y3="2.49933946" z3="-2.47700993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45502011" y3="2.99427408" z3="-0.39901884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6923801" y3="0.17595078" z3="-1.92894357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00911339" y3="1.42079189" z3="-1.80685823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.90253107" y3="0.11236696" z3="-2.67350823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.40333315" y3="1.2253804" z3="-3.30186827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.42302818" y3="-0.84753456" z3="-2.74627095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.33256407" y3="1.16455072" z3="-3.87514746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53643889" y3="2.54678044" z3="-2.49949643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.70089957" y3="2.45190335" z3="-3.22312926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.00116587" y3="3.49746917" z3="-2.45895247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08482846" y3="3.33113495" z3="-3.7481418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56850847" y3="3.91084145" z3="-0.22822443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.73871047" y3="5.06002112" z3="-0.07473286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.89928058" y3="3.97275676" z3="0.27295553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39038313" y3="5.12406665" z3="0.84022313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53498851" y3="3.08749113" z3="0.20932293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.41596913" y3="5.14552145" z3="1.21943302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.2802269" y3="6.24174133" z3="0.50273541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.57919676" y3="6.27954606" z3="0.94495611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.63490837" y3="7.12027413" z3="0.60020195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.98399699" y3="7.19195274" z3="1.39156885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.40633356" y3="-3.88894434" z3="-2.85369375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.57452234" y3="-4.93037634" z3="-2.53950668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.29584921" y3="-3.56058356" z3="-3.42380047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.54901839" y3="-3.8684835" z3="-3.54493956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73489158" y3="-1.56354869" z3="-2.05881635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.48480219" y3="-1.08278947" z3="-2.71309424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55520629" y3="-0.91068621" z3="-1.19099361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79618517" y3="-1.60018567" z3="-2.63509253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9418,-.9538,-.6574;6.6525,-1.9438,-1.4746;6.1313,-.9901,-1.3467;4.8058,1.48,-1.0297;4.3033,.3095,-.4874;2.6844,2.7288,-1.193;4.0224,2.7344,-.8398;2.3703,4.9894,-.4436;1.8223,3.8405,-.9638;1.7345,5.8641,-.2753;2.1441,1.5977,-1.732;3.122,.3476,.1957;1.7331,.3746,-.7011;.6046,.7319,.1948;1.7035,-.8678,-1.5634;1.0806,-2.4631,-1.3653;1.8379,-5.4659,-6.3558;1.6058,-5.0328,-5.3786;.9909,-3.8964,-2.8976;1.5775,-3.6523,-5.2285;1.3577,-5.8611,-4.2813;1.0643,-5.2869,-3.0506;1.2798,-3.0529,-3.9946;1.7793,-2.9838,-6.0691;1.4056,-6.9486,-4.3785;.9062,-5.9211,-2.1741;.6218,-3.3495,-1.6418;-.3659,-3.8279,-.8759;-.7167,-4.83,-1.1369;-.3691,-3.5262,.5736;-.3563,-3.0479,3.332;-.6626,-4.5593,1.4717;-.0879,-2.2491,1.0684;-.0788,-2.0122,2.4386;-.6477,-4.3225,2.8451;-.8617,-5.5674,1.0963;.1076,-1.4085,.4009;.1545,-1.0046,2.7931;-.8424,-5.1462,3.5373;-.3381,-2.8658,4.4105;1.2319,-1.7167,-3.958;1.4168,-1.3193,-3.061;.3579,3.685,-1.158;-2.1624,-2.957,-1.683;-2.9268,-3.1489,-.5274;-3.0956,-2.2887,.4227;-3.8252,-.731,.7138;-4.8133,-.3161,-.8125;-2.5093,.4903,1.1839;-4.9408,-1.0746,2.1765;-3.4089,-4.362,-.3009;-4.1066,-4.617,.909;-4.1794,-.1042,-1.6882;-5.4148,.5922,-.6262;-5.5058,-1.1364,-1.0751;-1.6508,.5803,.4944;-2.0963,.2379,2.176;-2.9912,1.4827,1.2607;-5.3933,-.1332,2.5369;-5.763,-1.7667,1.9231;-4.3628,-1.5113,3.0106;-5.0438,-4.0377,.9461;-3.4828,-4.3709,1.782;-4.3355,-5.6907,.8943;4.2871,-2.1987,-.1772;4.1327,-3.2755,-1.062;3.4778,-4.4368,-.6695;2.9871,-4.5172,.6286;3.1439,-3.4781,1.541;3.7852,-2.317,1.1281;4.4901,-3.1843,-2.0909;3.3257,-5.2613,-1.3669;2.2493,-5.7127,1.0391;2.7389,-3.5781,2.5491;3.8842,-1.4817,1.8233;-.5016,4.023,-.1037;-1.8669,3.7858,-.1881;-2.3702,3.2041,-1.3466;-1.551,2.8918,-2.4286;-.1872,3.134,-2.3272;-.0836,4.4299,.8202;-2.5373,4.0198,.6393;-3.7974,2.8801,-1.4164;-1.9832,2.4488,-3.3265;.468,2.8661,-3.1573;2.1619,-5.9486,2.2239;1.75,-6.397,.1646;-4.244,2.4993,-2.477;-4.455,2.9943,-.399;6.6924,.176,-1.9289;6.0091,1.4208,-1.8069;7.9025,.1124,-2.6735;8.4033,1.2254,-3.3019;8.423,-.8475,-2.7463;9.3326,1.1646,-3.8751;6.5364,2.5468,-2.4995;7.7009,2.4519,-3.2231;6.0012,3.4975,-2.459;8.0848,3.3311,-3.7481;4.5685,3.9108,-.2282;3.7387,5.06,-.0747;5.8993,3.9728,.273;6.3904,5.1241,.8402;6.535,3.0875,.2093;7.416,5.1455,1.2194;4.2802,6.2417,.5027;5.5792,6.2795,.945;3.6349,7.1203,.6002;5.984,7.192,1.3916;-2.4063,-3.8889,-2.8537;-2.5745,-4.9304,-2.5395;-3.2958,-3.5606,-3.4238;-1.549,-3.8685,-3.5449;-1.7349,-1.5635,-2.0588;-2.4848,-1.0828,-2.7131;-1.5552,-.9107,-1.191;-.7962,-1.6002,-2.6351;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662807744009</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001752399051 0.000150334962 0.016059037287 0.005336366313</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056884694 -0.002115409 0.000034053 0.000229847 0.000332391 0.000379663 0.000425208 0.000495648 0.000598919 0.000670967 0.000785408 0.000892731 0.001060039 0.001132649 0.001282507 0.001311456 0.001371769 0.001520484 0.001784870 0.001966504 0.002271511 0.002394844 0.002517733 0.003103370 0.003310365 0.003737803 0.004092730 0.004338510 0.004588572 0.004643750 0.004913971 0.005163586 0.005891756 0.006015829 0.006498561 0.006715676 0.006970994 0.007257014 0.007967275 0.008092340 0.008368660 0.009158364 0.009678994 0.009887652 0.010914318 0.011114426 0.011285248 0.012004317 0.013176186 0.013365800 0.013839927 0.014544508 0.014857584 0.015430911 0.015714211 0.016384003 0.016462224 0.016837860 0.018150427 0.019114173 0.019815734 0.020252964 0.021020944 0.021554396 0.022096160 0.022680992 0.023342601 0.023589898 0.024449840 0.025821488 0.026330270 0.026566080 0.026995244 0.027164897 0.027983261 0.028737951 0.030344376 0.030594217 0.032638993 0.032969225 0.034329742 0.035683686 0.038801479 0.039156597 0.041806716 0.045345973 0.045482473 0.045769552 0.048485204 0.049323833 0.049681633 0.050137300 0.051523513 0.051891420 0.052013597 0.052283037 0.052381030 0.052962573 0.053347160 0.055316562 0.056268504 0.056503328 0.056609750 0.056966044 0.057564255 0.058314560 0.059156135 0.059501219 0.060764730 0.061924574 0.062159685 0.064090926 0.064197966 0.064821518 0.065480662 0.066792246 0.067669731 0.068830318 0.069947298 0.071770822 0.072093321 0.072446403 0.072887799 0.075270134 0.077995330 0.080502432 0.081261731 0.083093435 0.083293026 0.086448242 0.088523935 0.089286633 0.089760506 0.091242264 0.093203059 0.094462947 0.095405365 0.096068836 0.096786590 0.098059503 0.099961852 0.100341482 0.102399068 0.103187134 0.103743056 0.104723740 0.105185399 0.108095676 0.110569993 0.111847570 0.112490590 0.113257843 0.114261902 0.116061883 0.116745223 0.117601016 0.118462496 0.121766894 0.124420043 0.125397580 0.128314810 0.128587898 0.129937517 0.133190907 0.135961436 0.137257661 0.138250812 0.138531489 0.139793219 0.141664264 0.143453241 0.145541873 0.146153086 0.151622151 0.153211905 0.153318692 0.159924541 0.160830669 0.168350396 0.171265827 0.175477983 0.178711241 0.181255372 0.183820973 0.188563503 0.189088867 0.191180865 0.200567684 0.202053196 0.205826506 0.206806945 0.207198644 0.210436110 0.211857980 0.212511864 0.213436843 0.216494789 0.218242048 0.220544311 0.223938005 0.225394266 0.231782179 0.233518869 0.234606679 0.238306175 0.245118451 0.247224650 0.250818987 0.256366018 0.256711739 0.257273520 0.262251487 0.271511053 0.282655555 0.291673954 0.299531755 0.299889155 0.300821905 0.306981683 0.307724117 0.309596321 0.318439600 0.321108851 0.326249623 0.329119337 0.335256571 0.347548678 0.351461773 0.355568460 0.359493795 0.360541021 0.364024124 0.384053781 0.406662229 0.411793599 0.430122697 0.431725479 0.434307552 0.448947827 0.464340249 0.473543686 0.478456894 0.479020971 0.486377732 0.498804451 0.502547995 0.513906006 0.516315376 0.543629661 0.566723976 0.567467766 0.585583448 0.591797279 0.605625782 0.643322876 0.645167208 0.665917259 0.675495454 0.685532557 0.693454028 0.701019464 0.703169294 0.704267487 0.717063908 0.731471816 0.736836086 0.737980708 0.747144417 0.750741582 0.771602352 0.775953821 0.807430399 0.819793829 0.821650670 0.827965069 0.833869455 0.846586166 0.847292417 0.849489425 0.853803556 0.860155163 0.867431837 0.874977679 0.881166398 0.887259296 0.889558664 0.892390457 0.900794724 0.908539310 0.915458416 0.917630618 0.924389888 0.931686899 0.934811216 0.953696653 0.956634905 0.962091200 0.969595602 0.975185841 0.982169593 0.998503829 1.004337446 1.014005665 1.019400662 1.039403061 1.052032307 1.055512878 1.069241998 1.077810780 1.087058459 1.103262772 1.110241271 1.111579619 1.117884424 1.122496762 1.123501323 1.135251934 1.148214518 1.161648985 1.169949994 1.176510710 1.186456223 1.200621749 1.220623867 1.231099742 1.256976016 1.296271683 1.296447414 1.314626556 1.326332006 1.326688181 1.329854833 1.330862194 1.334640512 1.341382129 1.347594946 1.363589442 1.379422918 1.381084157 1.381554904 1.426368724 1.509651613 1.557871334 1.682723916 1.918124999</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">156</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93818315" y3="-0.9533742" z3="-0.65227284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.64746286" y3="-1.94679918" z3="-1.46860883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12714972" y3="-0.99230935" z3="-1.34254878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80439227" y3="1.47974171" z3="-1.03008974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.30119586" y3="0.31091838" z3="-0.48455312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68441709" y3="2.7309837" z3="-1.19326153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02280627" y3="2.73559078" z3="-0.84200085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37347612" y3="4.99306067" z3="-0.44728617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82364168" y3="3.84375226" z3="-0.96442973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.73863688" y3="5.8685964" z3="-0.27924574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1421095" y3="1.59982681" z3="-1.72988424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12041046" y3="0.35174569" z3="0.1992945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.73138731" y3="0.37808703" z3="-0.69739987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60282302" y3="0.73582756" z3="0.19820043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.70225214" y3="-0.86484347" z3="-1.5588714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08051001" y3="-2.45813947" z3="-1.36350805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.84602635" y3="-5.45606827" z3="-6.35567025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.61325614" y3="-5.02417919" z3="-5.37810794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99556837" y3="-3.89077278" z3="-2.89635531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.5823468" y3="-3.64379036" z3="-5.22693504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.36682341" y3="-5.85380567" z3="-4.28141001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07191313" y3="-5.28104921" z3="-3.05031686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.28330587" y3="-3.045905" z3="-3.99267019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.78291124" y3="-2.97417392" z3="-6.06700269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.41685367" y3="-6.94122873" z3="-4.37937831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91424452" y3="-5.91588786" z3="-2.17427098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62403511" y3="-3.34580083" z3="-1.64055626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36465662" y3="-3.82577783" z3="-0.87682096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71330123" y3="-4.82821405" z3="-1.13880013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36977926" y3="-3.52579098" z3="0.57289072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35969008" y3="-3.05129273" z3="3.3328452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66296367" y3="-4.56067287" z3="1.4702124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09018773" y3="-2.24837677" z3="1.06930752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08202819" y3="-2.01382667" z3="2.4401548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64968419" y3="-4.32588835" z3="2.84403048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86204845" y3="-5.56795323" z3="1.09315328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10837131" y3="-1.40801751" z3="0.40449024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.15126239" y3="-1.00646932" z3="2.79617308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84830395" y3="-5.14938518" z3="3.5334441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34429541" y3="-2.86946763" z3="4.41142404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23283649" y3="-1.70977924" z3="-3.95506263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.41785516" y3="-1.31315718" z3="-3.05776775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35887132" y3="3.68805737" z3="-1.15525367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15983381" y3="-2.957875" z3="-1.68626511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9266012" y3="-3.15203119" z3="-0.53237501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09727357" y3="-2.2937164" z3="0.41892461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82797272" y3="-0.73645897" z3="0.7124884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.81290754" y3="-0.31537353" z3="-0.81440903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51217128" y3="0.48291634" z3="1.1887669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.94825382" y3="-1.08490797" z3="2.17139002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40847907" y3="-4.36578823" z3="-0.30803188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10659905" y3="-4.6221426" z3="0.90112316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.17653264" y3="-0.09956309" z3="-1.68818024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41517984" y3="0.59229623" z3="-0.62535915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.50537589" y3="-1.13460155" z3="-1.0828746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65134123" y3="0.57276988" z3="0.50151215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.10215255" y3="0.22853557" z3="2.18161488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99310705" y3="1.47569224" z3="1.26581959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.40293903" y3="-0.14463707" z3="2.53265518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.76944879" y3="-1.77690205" z3="1.91324825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.37284024" y3="-1.52341248" z3="3.00685042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04174072" y3="-4.04007271" z3="0.94092682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48117109" y3="-4.38006089" z3="1.77438687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33819638" y3="-5.69587468" z3="0.8841865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28284361" y3="-2.19741521" z3="-0.17023185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.12916423" y3="-3.27512158" z3="-1.05411122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47472716" y3="-4.43651862" z3="-0.66087096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98534239" y3="-4.5173912" z3="0.63761591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14074917" y3="-3.47701519" z3="1.54907113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78023515" y3="-2.31485974" z3="1.13485925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48705713" y3="-3.18456045" z3="-2.08290899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32194555" y3="-5.26056087" z3="-1.35828586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24712889" y3="-5.71206645" z3="1.0475896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73542826" y3="-3.57621407" z3="2.55715963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87773171" y3="-1.47846888" z3="1.82922217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49785827" y3="4.02306673" z3="-0.09792106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86322821" y3="3.78500511" z3="-0.17916219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.36932876" y3="3.20571839" z3="-1.33755011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55282059" y3="2.89610286" z3="-2.42236522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.18886556" y3="3.13888722" z3="-2.32401473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07756475" y3="4.42851211" z3="0.82549083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.53154515" y3="4.01671534" z3="0.65054119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79666524" y3="2.88196819" z3="-1.40458366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.98716662" y3="2.45490248" z3="-3.32013197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.46419981" y3="2.87310155" z3="-3.15673318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1693917" y3="-5.95432455" z3="2.22986848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7339835" y3="-6.38641915" z3="0.17282671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.24588614" y3="2.50470277" z3="-2.4655144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45179206" y3="2.99325667" z3="-0.38525234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68848832" y3="0.17164612" z3="-1.92856849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00643284" y3="1.41737834" z3="-1.80882964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.89729124" y3="0.10489719" z3="-2.67508027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.39776578" y3="1.21564107" z3="-3.30759678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.41684223" y3="-0.85567215" z3="-2.74613734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.325825" y3="1.15234141" z3="-3.88252369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.53341507" y3="2.5409574" z3="-2.50552981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.69644905" y3="2.442988" z3="-3.23105427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99891363" y3="3.49217979" z3="-2.46675553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.08005869" y3="3.32033414" z3="-3.75935581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5710928" y3="3.91276107" z3="-0.233907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74266214" y3="5.06308894" z3="-0.08127108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90289908" y3="3.97445039" z3="0.26431419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.39619479" y3="5.12652883" z3="0.82800779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53766874" y3="3.08844772" z3="0.20106766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42256426" y3="5.14784307" z3="1.20489147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.28642956" y3="6.24547779" z3="0.49255215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.58627692" y3="6.28297652" z3="0.93196356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64217209" y3="7.12484869" z3="0.58942306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="5.99277088" y3="7.19596432" z3="1.37574372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39912481" y3="-3.88897639" z3="-2.85833386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56657853" y3="-4.93090899" z3="-2.54475993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28752354" y3="-3.56186485" z3="-3.43141163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53962472" y3="-3.8673601" z3="-3.5470152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7340158" y3="-1.56329445" z3="-2.05937277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.48395912" y3="-1.08308546" z3="-2.71410151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55732818" y3="-0.91158185" z3="-1.19015005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79488134" y3="-1.59712668" z3="-2.63453503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9382,-.9534,-.6523;6.6475,-1.9468,-1.4686;6.1271,-.9923,-1.3425;4.8044,1.4797,-1.0301;4.3012,.3109,-.4846;2.6844,2.731,-1.1933;4.0228,2.7356,-.842;2.3735,4.9931,-.4473;1.8236,3.8438,-.9644;1.7386,5.8686,-.2792;2.1421,1.5998,-1.7299;3.1204,.3517,.1993;1.7314,.3781,-.6974;.6028,.7358,.1982;1.7023,-.8648,-1.5589;1.0805,-2.4581,-1.3635;1.846,-5.4561,-6.3557;1.6133,-5.0242,-5.3781;.9956,-3.8908,-2.8964;1.5823,-3.6438,-5.2269;1.3668,-5.8538,-4.2814;1.0719,-5.281,-3.0503;1.2833,-3.0459,-3.9927;1.7829,-2.9742,-6.067;1.4169,-6.9412,-4.3794;.9142,-5.9159,-2.1743;.624,-3.3458,-1.6406;-.3647,-3.8258,-.8768;-.7133,-4.8282,-1.1388;-.3698,-3.5258,.5729;-.3597,-3.0513,3.3328;-.663,-4.5607,1.4702;-.0902,-2.2484,1.0693;-.082,-2.0138,2.4402;-.6497,-4.3259,2.844;-.862,-5.568,1.0932;.1084,-1.408,.4045;.1513,-1.0065,2.7962;-.8483,-5.1494,3.5334;-.3443,-2.8695,4.4114;1.2328,-1.7098,-3.9551;1.4179,-1.3132,-3.0578;.3589,3.6881,-1.1553;-2.1598,-2.9579,-1.6863;-2.9266,-3.152,-.5324;-3.0973,-2.2937,.4189;-3.828,-.7365,.7125;-4.8129,-.3154,-.8144;-2.5122,.4829,1.1888;-4.9483,-1.0849,2.1714;-3.4085,-4.3658,-.308;-4.1066,-4.6221,.9011;-4.1765,-.0996,-1.6882;-5.4152,.5923,-.6254;-5.5054,-1.1346,-1.0829;-1.6513,.5728,.5015;-2.1022,.2285,2.1816;-2.9931,1.4757,1.2658;-5.4029,-.1446,2.5327;-5.7694,-1.7769,1.9132;-4.3728,-1.5234,3.0069;-5.0417,-4.0401,.9409;-3.4812,-4.3801,1.7744;-4.3382,-5.6959,.8842;4.2828,-2.1974,-.1702;4.1292,-3.2751,-1.0541;3.4747,-4.4365,-.6609;2.9853,-4.5174,.6376;3.1407,-3.477,1.5491;3.7802,-2.3149,1.1349;4.4871,-3.1846,-2.0829;3.3219,-5.2606,-1.3583;2.2471,-5.7121,1.0476;2.7354,-3.5762,2.5572;3.8777,-1.4785,1.8292;-.4979,4.0231,-.0979;-1.8632,3.785,-.1792;-2.3693,3.2057,-1.3376;-1.5528,2.8961,-2.4224;-.1889,3.1389,-2.324;-.0776,4.4285,.8255;-2.5315,4.0167,.6505;-3.7967,2.882,-1.4046;-1.9872,2.4549,-3.3201;.4642,2.8731,-3.1567;2.1694,-5.9543,2.2299;1.734,-6.3864,.1728;-4.2459,2.5047,-2.4655;-4.4518,2.9933,-.3853;6.6885,.1716,-1.9286;6.0064,1.4174,-1.8088;7.8973,.1049,-2.6751;8.3978,1.2156,-3.3076;8.4168,-.8557,-2.7461;9.3258,1.1523,-3.8825;6.5334,2.541,-2.5055;7.6964,2.443,-3.2311;5.9989,3.4922,-2.4668;8.0801,3.3203,-3.7594;4.5711,3.9128,-.2339;3.7427,5.0631,-.0813;5.9029,3.9745,.2643;6.3962,5.1265,.828;6.5377,3.0884,.2011;7.4226,5.1478,1.2049;4.2864,6.2455,.4926;5.5863,6.283,.932;3.6422,7.1248,.5894;5.9928,7.196,1.3757;-2.3991,-3.889,-2.8583;-2.5666,-4.9309,-2.5448;-3.2875,-3.5619,-3.4314;-1.5396,-3.8674,-3.547;-1.734,-1.5633,-2.0594;-2.484,-1.0831,-2.7141;-1.5573,-.9116,-1.1902;-.7949,-1.5971,-2.6345;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662801928069</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003670374221 0.000361826512 0.020179334476 0.005340430272</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885270 -0.000323896 0.000064684 0.000276202 0.000333497 0.000380761 0.000432784 0.000496803 0.000599072 0.000671828 0.000800403 0.000894196 0.001061609 0.001133152 0.001282504 0.001315903 0.001372831 0.001522542 0.001790318 0.001985294 0.002275541 0.002395332 0.002537008 0.003107383 0.003344629 0.003741829 0.004096243 0.004346018 0.004614908 0.004646868 0.004939434 0.005173403 0.005893845 0.006015499 0.006566714 0.006717390 0.006991236 0.007263273 0.008076246 0.008096624 0.008376901 0.009162677 0.009678750 0.009888297 0.010914706 0.011121118 0.011289012 0.012008793 0.013176644 0.013367734 0.013840911 0.014544470 0.014857883 0.015433118 0.015714285 0.016387617 0.016462682 0.016841267 0.018152054 0.019123675 0.019816308 0.020252957 0.021021069 0.021556203 0.022096401 0.022681766 0.023342640 0.023589724 0.024450380 0.025821765 0.026330521 0.026566291 0.026995290 0.027166514 0.027985205 0.028738027 0.030347168 0.030607401 0.032639336 0.032976528 0.034329373 0.035688258 0.038804461 0.039158613 0.041808750 0.045348663 0.045482319 0.045792941 0.048485225 0.049331545 0.049681709 0.050137311 0.051523879 0.051898052 0.052013842 0.052283075 0.052381298 0.052980697 0.053347249 0.055319483 0.056268614 0.056505165 0.056609710 0.056966228 0.057565638 0.058314763 0.059156453 0.059503749 0.060764893 0.061925393 0.062159801 0.064093045 0.064198383 0.064822426 0.065482400 0.066794567 0.067669731 0.068831063 0.069957200 0.071771434 0.072092764 0.072463433 0.072887937 0.075270790 0.077996644 0.080502731 0.081273042 0.083104751 0.083293088 0.086448301 0.088524814 0.089289290 0.089761405 0.091242196 0.093203213 0.094462953 0.095408674 0.096071997 0.096787328 0.098063956 0.099963198 0.100341415 0.102405722 0.103192310 0.103743323 0.104767580 0.105345610 0.108108459 0.110570039 0.111849581 0.112500166 0.113260059 0.114264488 0.116075624 0.116745645 0.117604945 0.118464374 0.121767405 0.124423251 0.125400514 0.128316147 0.128594026 0.129939793 0.133198083 0.135965132 0.137260831 0.138250995 0.138531652 0.139793800 0.141669399 0.143454009 0.145545721 0.146153714 0.151624898 0.153216168 0.153318892 0.159925005 0.160830149 0.168351381 0.171279120 0.175478930 0.178712133 0.181259348 0.183821290 0.188565864 0.189088851 0.191188538 0.200568966 0.202054699 0.205826653 0.206828597 0.207200100 0.210439773 0.211859845 0.212512941 0.213436933 0.216495757 0.218242186 0.220549407 0.223942041 0.225397114 0.231782313 0.233529279 0.234608427 0.238306171 0.245131044 0.247247561 0.250819436 0.256378182 0.256729437 0.257278829 0.262251511 0.271511618 0.282664826 0.291688731 0.299549988 0.299889291 0.300824611 0.306981718 0.307724140 0.309599509 0.318443137 0.321125768 0.326259202 0.329145909 0.335259442 0.347566446 0.351596074 0.355570175 0.359494040 0.360542503 0.364025490 0.384056166 0.406663466 0.411796302 0.430126748 0.431746405 0.434320022 0.448956013 0.464340251 0.473545193 0.478456754 0.479036515 0.486379487 0.498806043 0.502548736 0.513912247 0.516315744 0.543637551 0.566740746 0.567475194 0.585591719 0.591797277 0.605626033 0.643335070 0.645169899 0.665940303 0.675505207 0.685534079 0.693780036 0.701071366 0.703176996 0.704267616 0.717068058 0.731473755 0.736872275 0.737980706 0.747173140 0.750741682 0.771602363 0.775954370 0.807476359 0.819855603 0.821654369 0.827965206 0.833873633 0.846587606 0.847306292 0.849499435 0.853815024 0.860168413 0.867433495 0.874983577 0.881169962 0.887259363 0.889602094 0.892400762 0.900800079 0.908548600 0.915473988 0.917641080 0.924390576 0.931687375 0.934824461 0.953700355 0.956635397 0.962092122 0.969600737 0.975193383 0.982177312 0.998504888 1.004340096 1.014038544 1.019457601 1.039413247 1.052475641 1.055582126 1.069242836 1.077822681 1.087066344 1.103262904 1.110241810 1.111579926 1.117900919 1.122496763 1.123501331 1.135289060 1.148220626 1.161650122 1.169952324 1.176514272 1.186465613 1.200630151 1.220624424 1.231100929 1.257194918 1.296271919 1.296447661 1.314627826 1.326333179 1.326692275 1.329858578 1.330862535 1.334640791 1.341387500 1.347600295 1.363614349 1.379459339 1.381086203 1.381554993 1.426368743 1.509664599 1.557871376 1.683770359 1.918132369</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">157</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9339748" y3="-0.95380203" z3="-0.65410882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6409218" y3="-1.94863316" z3="-1.47336462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.12149467" y3="-0.99376117" z3="-1.34674832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.80128464" y3="1.47931286" z3="-1.03219904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29809571" y3="0.31094263" z3="-0.48557499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.68207643" y3="2.7327967" z3="-1.19050003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.02135667" y3="2.7358742" z3="-0.84219353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37533533" y3="4.99492528" z3="-0.44301972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82314318" y3="3.84652634" z3="-0.95960799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74171748" y3="5.87096189" z3="-0.27326476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13707032" y3="1.60250773" z3="-1.72634849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11847546" y3="0.35279288" z3="0.20035429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72798201" y3="0.37985383" z3="-0.69414535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60066986" y3="0.73645905" z3="0.20354362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69727592" y3="-0.86243297" z3="-1.55660518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08184038" y3="-2.45872121" z3="-1.36148722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.85988714" y3="-5.45651726" z3="-6.35143893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.62387847" y3="-5.02456814" z3="-5.37477566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="0.99931303" y3="-3.89107447" z3="-2.89494218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.59186856" y3="-3.64429701" z3="-5.22385695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.37447491" y3="-5.85407346" z3="-4.27888383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.07605171" y3="-5.28124884" z3="-3.04877625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.2892632" y3="-3.04628629" z3="-3.99057025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.79442657" y3="-2.97481347" z3="-6.06337386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.42506966" y3="-6.94138142" z3="-4.37663908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9160733" y3="-5.91628705" z3="-2.17333293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62589237" y3="-3.3460669" z3="-1.63965508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36219913" y3="-3.82717663" z3="-0.87605207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.71012257" y3="-4.83008474" z3="-1.1381469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36884994" y3="-3.52640629" z3="0.57377683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36045594" y3="-3.05070779" z3="3.33217768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66186381" y3="-4.56097871" z3="1.47005381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09018418" y3="-2.24982292" z3="1.07031545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08334318" y3="-2.01393058" z3="2.44078635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64854097" y3="-4.32553601" z3="2.84375669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85731505" y3="-5.56982425" z3="1.093595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10250027" y3="-1.40716258" z3="0.40225634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14690313" y3="-1.00587328" z3="2.79657521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83895886" y3="-5.15182244" z3="3.536653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34327309" y3="-2.87016358" z3="4.41102232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.23821183" y3="-1.71035498" z3="-3.95348882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.41860253" y3="-1.31284198" z3="-3.05565683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35781757" y3="3.69279315" z3="-1.14836764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15905441" y3="-2.96016688" z3="-1.68736731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92552253" y3="-3.15418703" z3="-0.53342038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09923227" y3="-2.29414453" z3="0.41591422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83004614" y3="-0.73648823" z3="0.70574132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.80589294" y3="-0.31320394" z3="-0.82604475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51619518" y3="0.48100483" z3="1.19067969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.95877547" y3="-1.08428648" z3="2.15715266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40473782" y3="-4.36878202" z3="-0.30767484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10289992" y3="-4.62604042" z3="0.90129595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.16547602" y3="-0.0893364" z3="-1.69377804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41348485" y3="0.58996334" z3="-0.63548267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.49148877" y3="-1.13420364" z3="-1.10281771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65265224" y3="0.57178841" z3="0.50755367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.11119042" y3="0.22476759" z3="2.18507359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99697056" y3="1.47403665" z3="1.26716771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.41379697" y3="-0.14360011" z3="2.51668349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.77935701" y3="-1.77413894" z3="1.89306892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.38970342" y3="-1.52517263" z3="2.99492217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0402026" y3="-4.0462821" z3="0.9388918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47921014" y3="-4.38200816" z3="1.77513377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33204499" y3="-5.69977535" z3="0.88393057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27948925" y3="-2.19730084" z3="-0.17001602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.12644881" y3="-3.27663335" z3="-1.05189925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47363259" y3="-4.43779135" z3="-0.65619898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9832551" y3="-4.51536275" z3="0.64196336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13851941" y3="-3.47380893" z3="1.55168433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77780991" y3="-2.3129173" z3="1.13561137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48341501" y3="-3.18763731" z3="-2.08116645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32377691" y3="-5.26506958" z3="-1.35120214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.24960685" y3="-5.71266934" z3="1.05605914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73406615" y3="-3.57180016" z3="2.560221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87579716" y3="-1.47593725" z3="1.8286479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49695936" y3="4.02570923" z3="-0.08878564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86267275" y3="3.78900421" z3="-0.16848488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37114177" y3="3.21395064" z3="-1.32807815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.55653345" y3="2.90661061" z3="-2.41497674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.1921675" y3="3.1475488" z3="-2.31793247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07476465" y3="4.42810933" z3="0.835249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52951725" y3="4.01878606" z3="0.66300893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.79897201" y3="2.89194369" z3="-1.39411674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.99276274" y3="2.46874884" z3="-3.31352869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45950815" y3="2.88350449" z3="-3.15221369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16892614" y3="-5.94853081" z3="2.24050575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74927944" y3="-6.40027616" z3="0.18534408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.25061959" y3="2.52114551" z3="-2.45602315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45202803" y3="2.99794442" z3="-0.37304482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.68238246" y3="0.16955498" z3="-1.93446343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="6.00167694" y3="1.41585225" z3="-1.81351492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.88930673" y3="0.10146238" z3="-2.68387265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.38922509" y3="1.21153709" z3="-3.31817962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.40771897" y3="-0.85961967" z3="-2.75576235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.31573206" y3="1.14718049" z3="-3.8955197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52816203" y3="2.53879497" z3="-2.51179297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.68926718" y3="2.43951281" z3="-3.24029829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.99471304" y3="3.4905312" z3="-2.47193946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.07239504" y3="3.31631492" z3="-3.7700063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57233232" y3="3.91223999" z3="-0.23480562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74550579" y3="5.06334144" z3="-0.07986947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90535047" y3="3.97234043" z3="0.26071832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40122331" y3="5.12354946" z3="0.82394893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.53901547" y3="3.08579405" z3="0.19591009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.42847242" y3="5.14357407" z3="1.19883341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29191923" y3="6.24484916" z3="0.49325448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59286652" y3="6.28076377" z3="0.92999708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.64885255" y3="7.12483115" z3="0.5917202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.00144685" y3="7.19306005" z3="1.37328619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39768467" y3="-3.89233597" z3="-2.85871824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56788674" y3="-4.93328855" z3="-2.54487894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28411089" y3="-3.56370962" z3="-3.43289833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53718677" y3="-3.87234436" z3="-3.54607331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73409595" y3="-1.56569056" z3="-2.06247758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.48310056" y3="-1.08737468" z3="-2.71966965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55895982" y3="-0.9120152" z3="-1.1944454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.79317504" y3="-1.60014919" z3="-2.63551387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.934,-.9538,-.6541;6.6409,-1.9486,-1.4734;6.1215,-.9938,-1.3467;4.8013,1.4793,-1.0322;4.2981,.3109,-.4856;2.6821,2.7328,-1.1905;4.0214,2.7359,-.8422;2.3753,4.9949,-.443;1.8231,3.8465,-.9596;1.7417,5.871,-.2733;2.1371,1.6025,-1.7263;3.1185,.3528,.2004;1.728,.3799,-.6941;.6007,.7365,.2035;1.6973,-.8624,-1.5566;1.0818,-2.4587,-1.3615;1.8599,-5.4565,-6.3514;1.6239,-5.0246,-5.3748;.9993,-3.8911,-2.8949;1.5919,-3.6443,-5.2239;1.3745,-5.8541,-4.2789;1.0761,-5.2812,-3.0488;1.2893,-3.0463,-3.9906;1.7944,-2.9748,-6.0634;1.4251,-6.9414,-4.3766;.9161,-5.9163,-2.1733;.6259,-3.3461,-1.6397;-.3622,-3.8272,-.8761;-.7101,-4.8301,-1.1381;-.3688,-3.5264,.5738;-.3605,-3.0507,3.3322;-.6619,-4.561,1.4701;-.0902,-2.2498,1.0703;-.0833,-2.0139,2.4408;-.6485,-4.3255,2.8438;-.8573,-5.5698,1.0936;.1025,-1.4072,.4023;.1469,-1.0059,2.7966;-.839,-5.1518,3.5367;-.3433,-2.8702,4.411;1.2382,-1.7104,-3.9535;1.4186,-1.3128,-3.0557;.3578,3.6928,-1.1484;-2.1591,-2.9602,-1.6874;-2.9255,-3.1542,-.5334;-3.0992,-2.2941,.4159;-3.83,-.7365,.7057;-4.8059,-.3132,-.826;-2.5162,.481,1.1907;-4.9588,-1.0843,2.1572;-3.4047,-4.3688,-.3077;-4.1029,-4.626,.9013;-4.1655,-.0893,-1.6938;-5.4135,.59,-.6355;-5.4915,-1.1342,-1.1028;-1.6527,.5718,.5076;-2.1112,.2248,2.1851;-2.997,1.474,1.2672;-5.4138,-.1436,2.5167;-5.7794,-1.7741,1.8931;-4.3897,-1.5252,2.9949;-5.0402,-4.0463,.9389;-3.4792,-4.382,1.7751;-4.332,-5.6998,.8839;4.2795,-2.1973,-.17;4.1264,-3.2766,-1.0519;3.4736,-4.4378,-.6562;2.9833,-4.5154,.642;3.1385,-3.4738,1.5517;3.7778,-2.3129,1.1356;4.4834,-3.1876,-2.0812;3.3238,-5.2651,-1.3512;2.2496,-5.7127,1.0561;2.7341,-3.5718,2.5602;3.8758,-1.4759,1.8286;-.497,4.0257,-.0888;-1.8627,3.789,-.1685;-2.3711,3.214,-1.3281;-1.5565,2.9066,-2.415;-.1922,3.1475,-2.3179;-.0748,4.4281,.8352;-2.5295,4.0188,.663;-3.799,2.8919,-1.3941;-1.9928,2.4687,-3.3135;.4595,2.8835,-3.1522;2.1689,-5.9485,2.2405;1.7493,-6.4003,.1853;-4.2506,2.5211,-2.456;-4.452,2.9979,-.373;6.6824,.1696,-1.9345;6.0017,1.4159,-1.8135;7.8893,.1015,-2.6839;8.3892,1.2115,-3.3182;8.4077,-.8596,-2.7558;9.3157,1.1472,-3.8955;6.5282,2.5388,-2.5118;7.6893,2.4395,-3.2403;5.9947,3.4905,-2.4719;8.0724,3.3163,-3.77;4.5723,3.9122,-.2348;3.7455,5.0633,-.0799;5.9054,3.9723,.2607;6.4012,5.1235,.8239;6.539,3.0858,.1959;7.4285,5.1436,1.1988;4.2919,6.2448,.4933;5.5929,6.2808,.93;3.6489,7.1248,.5917;6.0014,7.1931,1.3733;-2.3977,-3.8923,-2.8587;-2.5679,-4.9333,-2.5449;-3.2841,-3.5637,-3.4329;-1.5372,-3.8723,-3.5461;-1.7341,-1.5657,-2.0625;-2.4831,-1.0874,-2.7197;-1.559,-.912,-1.1944;-.7932,-1.6001,-2.6355;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662821525313</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002743017530 0.000332985057 0.021087927018 0.005339595821</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056884910 -0.001058464 0.000190373 0.000280613 0.000353595 0.000380761 0.000435713 0.000497645 0.000602854 0.000675708 0.000799021 0.000894062 0.001062455 0.001133480 0.001282421 0.001315692 0.001373253 0.001521961 0.001792880 0.001980292 0.002274161 0.002397423 0.002571709 0.003121049 0.003363194 0.003744078 0.004101011 0.004344519 0.004627412 0.004651723 0.004962814 0.005191241 0.005893494 0.006015990 0.006623479 0.006731223 0.007015915 0.007273129 0.008090966 0.008176130 0.008397634 0.009163533 0.009679464 0.009897769 0.010914582 0.011122343 0.011298103 0.012008465 0.013176856 0.013371873 0.013842095 0.014545738 0.014858997 0.015435730 0.015714372 0.016390420 0.016464537 0.016841710 0.018156575 0.019140295 0.019822526 0.020253001 0.021021928 0.021563060 0.022097044 0.022683010 0.023342771 0.023590220 0.024450432 0.025821773 0.026330742 0.026566349 0.026995341 0.027166570 0.027992901 0.028739485 0.030374015 0.030645779 0.032638332 0.033001635 0.034329559 0.035693292 0.038809033 0.039161056 0.041810156 0.045350093 0.045483134 0.045794750 0.048485748 0.049349002 0.049682236 0.050137922 0.051524844 0.051918996 0.052013749 0.052283110 0.052381845 0.053032426 0.053347236 0.055327104 0.056268504 0.056505303 0.056609819 0.056966787 0.057568516 0.058316994 0.059158866 0.059505417 0.060764924 0.061927095 0.062165117 0.064094963 0.064199581 0.064824039 0.065486127 0.066798890 0.067670431 0.068832050 0.069965723 0.071775600 0.072092643 0.072477992 0.072888500 0.075277419 0.078006644 0.080503002 0.081288062 0.083116845 0.083292932 0.086448559 0.088526787 0.089292462 0.089762406 0.091242005 0.093204380 0.094462985 0.095416877 0.096073285 0.096787041 0.098068124 0.099964847 0.100341506 0.102414190 0.103208521 0.103748957 0.104801006 0.105844902 0.108146096 0.110571354 0.111851268 0.112533832 0.113267642 0.114272367 0.116079993 0.116746658 0.117615651 0.118467816 0.121767237 0.124422435 0.125400603 0.128316438 0.128594959 0.129957343 0.133217249 0.135966513 0.137260265 0.138262896 0.138531769 0.139793931 0.141671217 0.143455054 0.145548358 0.146154246 0.151625692 0.153215637 0.153319661 0.159925046 0.160829817 0.168351276 0.171292067 0.175484583 0.178712068 0.181261878 0.183824633 0.188565803 0.189089654 0.191187867 0.200570097 0.202063407 0.205829379 0.206839481 0.207200196 0.210452314 0.211859887 0.212512767 0.213436967 0.216495631 0.218242250 0.220552655 0.223942678 0.225398248 0.231784082 0.233576490 0.234613804 0.238306165 0.245127932 0.247247565 0.250821769 0.256389482 0.256746159 0.257279477 0.262251818 0.271512104 0.282669367 0.291707489 0.299556331 0.299889807 0.300840866 0.306983118 0.307724181 0.309603302 0.318442699 0.321151725 0.326261410 0.329154621 0.335259849 0.347566787 0.351730238 0.355570941 0.359494576 0.360542368 0.364031119 0.384083332 0.406671025 0.411796119 0.430129297 0.431744880 0.434326311 0.448962691 0.464347624 0.473548389 0.478476709 0.479051636 0.486386839 0.498808180 0.502553100 0.513911916 0.516315470 0.543638129 0.566740854 0.567476520 0.585603689 0.591798486 0.605626004 0.643340179 0.645170031 0.665983547 0.675505670 0.685543707 0.694224183 0.701071162 0.703177027 0.704269797 0.717068195 0.731473698 0.736873870 0.737980752 0.747175195 0.750741736 0.771602381 0.775954462 0.807506604 0.819961512 0.821655217 0.827968009 0.833873978 0.846588271 0.847308313 0.849517272 0.853816820 0.860219958 0.867433470 0.874985061 0.881169735 0.887259496 0.889626762 0.892412074 0.900801041 0.908557420 0.915474395 0.917641952 0.924390678 0.931687385 0.934827383 0.953708652 0.956642367 0.962092404 0.969603965 0.975195142 0.982182756 0.998505570 1.004341029 1.014086245 1.019528660 1.039429868 1.052959596 1.055682242 1.069243128 1.077851134 1.087072189 1.103262882 1.110242322 1.111580056 1.117914679 1.122496800 1.123501358 1.135348792 1.148220640 1.161650139 1.169953070 1.176514807 1.186477392 1.200632304 1.220626535 1.231100913 1.257204159 1.296272775 1.296449167 1.314627811 1.326333057 1.326692195 1.329858439 1.330883061 1.334640863 1.341397485 1.347606617 1.363662802 1.379459442 1.381086230 1.381556826 1.426368729 1.509671629 1.557872042 1.683841687 1.918132946</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">158</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93215419" y3="-0.95411395" z3="-0.65917888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63699607" y3="-1.94851819" z3="-1.48344169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11779081" y3="-0.99376261" z3="-1.35508666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79881369" y3="1.47919169" z3="-1.03548664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29676042" y3="0.31059079" z3="-0.48852095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67969394" y3="2.73346667" z3="-1.18727758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01970835" y3="2.73570172" z3="-0.84204814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37545882" y3="4.9946908" z3="-0.43500228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82178263" y3="3.84738556" z3="-0.95270079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74252361" y3="5.87079686" z3="-0.2622949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13321891" y3="1.60390968" z3="-1.72336625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11876568" y3="0.35237641" z3="0.20006338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7262843" y3="0.38030208" z3="-0.69140068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60109588" y3="0.73663364" z3="0.20898924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69371677" y3="-0.86158187" z3="-1.55429651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08174238" y3="-2.46013493" z3="-1.35977841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.87178824" y3="-5.46394124" z3="-6.34454715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.63349053" y3="-5.0310848" z3="-5.36869157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00309323" y3="-3.89522068" z3="-2.89117032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.60124197" y3="-3.6506105" z3="-5.21915618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38160434" y3="-5.85964472" z3="-4.27237004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.0805272" y3="-5.28576063" z3="-3.04324315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.29559945" y3="-3.05140863" z3="-3.98703267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.80600741" y3="-2.98188092" z3="-6.05889462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.43241117" y3="-6.94711174" z3="-4.36905884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91975293" y3="-5.92025411" z3="-2.16719362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62727697" y3="-3.34871295" z3="-1.63726773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36129254" y3="-3.8296812" z3="-0.87459947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70954422" y3="-4.8320624" z3="-1.13715204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36936195" y3="-3.52800411" z3="0.57468722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.35980341" y3="-3.05111827" z3="3.33440913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65966675" y3="-4.56268499" z3="1.47298878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0944281" y3="-2.24886882" z3="1.06985006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08705101" y3="-2.01309413" z3="2.44037891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64654687" y3="-4.32662541" z3="2.84658772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85735461" y3="-5.56998329" z3="1.09651215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10489356" y3="-1.41024369" z3="0.40557314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.14279317" y3="-1.00472799" z3="2.79510692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84590341" y3="-5.14862847" z3="3.53486588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34379582" y3="-2.86839325" z3="4.41285955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.24471855" y3="-1.71537675" z3="-3.9515515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42172704" y3="-1.31628994" z3="-3.05358785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35611212" y3="3.69548803" z3="-1.14007829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15776661" y3="-2.96204786" z3="-1.68804838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9248688" y3="-3.15425299" z3="-0.53452537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10013632" y3="-2.29324572" z3="0.4136284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83079524" y3="-0.73431766" z3="0.69853579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.79782798" y3="-0.30827918" z3="-0.83818536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51743318" y3="0.48077013" z3="1.19047532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.96935931" y3="-1.0805067" z3="2.14311855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40347444" y3="-4.36861134" z3="-0.30760946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1023151" y3="-4.62437233" z3="0.90134353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.15168827" y3="-0.07906485" z3="-1.70084526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.41054864" y3="0.59229305" z3="-0.64976759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.47868703" y3="-1.13084146" z3="-1.12390564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.651547" y3="0.57273364" z3="0.51002514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.11584109" y3="0.22121468" z3="2.18549744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99804441" y3="1.4737325" z3="1.26792801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.42433369" y3="-0.1390912" z3="2.5004292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.79008867" y3="-1.76813176" z3="1.87298818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.40686397" y3="-1.52342434" z3="2.98458311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03914394" y3="-4.04495779" z3="0.93841216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.47917997" y3="-4.37886006" z3="1.77516954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33075076" y3="-5.69848983" z3="0.88586909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27943626" y3="-2.19768822" z3="-0.17283798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.126983" y3="-3.27883353" z3="-1.05276329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47605724" y3="-4.4403248" z3="-0.65442376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98730582" y3="-4.51706886" z3="0.64449323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14180784" y3="-3.47332077" z3="1.55220764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77894287" y3="-2.31173151" z3="1.13342824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48286829" y3="-3.19118838" z3="-2.08252989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32516299" y3="-5.26763789" z3="-1.34828417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2525765" y3="-5.71178139" z3="1.05989601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73781563" y3="-3.56965366" z3="2.56109497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87602718" y3="-1.472981" z3="1.82487657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49742945" y3="4.02682149" z3="-0.07900119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86363031" y3="3.79256607" z3="-0.15881264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37362712" y3="3.22121695" z3="-1.31949748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56028517" y3="2.91577308" z3="-2.40788015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19542328" y3="3.15412675" z3="-2.31073419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07397541" y3="4.42604789" z3="0.84591768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52968466" y3="4.02124048" z3="0.67358679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80200361" y3="2.90121143" z3="-1.38573522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-1.99767813" y3="2.48095715" z3="-3.30729718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45531593" y3="2.89130047" z3="-3.14614175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17397847" y3="-5.94766016" z3="2.24489502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.74557931" y3="-6.39390096" z3="0.18759781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.25549736" y3="2.53643116" z3="-2.44926559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45355226" y3="3.00247941" z3="-0.36299715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.67719946" y3="0.1698046" z3="-1.9436557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99714859" y3="1.41618851" z3="-1.81984152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.88205844" y3="0.10209052" z3="-2.69636947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.38053693" y3="1.21264083" z3="-3.33092536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.40003516" y3="-0.85906428" z3="-2.77060281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.30544471" y3="1.14857714" z3="-3.91080802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.52211361" y3="2.53972361" z3="-2.51824157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.68123749" y3="2.44082375" z3="-3.24987459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98911973" y3="3.49163504" z3="-2.47584399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.06327262" y3="3.3180712" z3="-3.77960496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57249387" y3="3.91085166" z3="-0.2338678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74636342" y3="5.06198216" z3="-0.07462684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90671225" y3="3.96956169" z3="0.2585003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40421531" y3="5.11958847" z3="0.82287498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54002213" y3="3.08284631" z3="0.19030875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43235172" y3="5.13856715" z3="1.19527408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29442075" y3="6.24227774" z3="0.49968347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59637011" y3="6.27693915" z3="0.93337852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65185042" y3="7.12236551" z3="0.60158653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.00623252" y3="7.18829886" z3="1.37758812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39548768" y3="-3.89639038" z3="-2.8581734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56103295" y3="-4.93834141" z3="-2.54261343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.28527056" y3="-3.57228239" z3="-3.43188057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53596949" y3="-3.87355858" z3="-3.54688996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.73080418" y3="-1.56890499" z3="-2.06418273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.478124" y3="-1.09121268" z3="-2.72342797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55773561" y3="-0.91379092" z3="-1.19651249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78928322" y3="-1.60428064" z3="-2.63559627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9322,-.9541,-.6592;6.637,-1.9485,-1.4834;6.1178,-.9938,-1.3551;4.7988,1.4792,-1.0355;4.2968,.3106,-.4885;2.6797,2.7335,-1.1873;4.0197,2.7357,-.842;2.3755,4.9947,-.435;1.8218,3.8474,-.9527;1.7425,5.8708,-.2623;2.1332,1.6039,-1.7234;3.1188,.3524,.2001;1.7263,.3803,-.6914;.6011,.7366,.209;1.6937,-.8616,-1.5543;1.0817,-2.4601,-1.3598;1.8718,-5.4639,-6.3445;1.6335,-5.0311,-5.3687;1.0031,-3.8952,-2.8912;1.6012,-3.6506,-5.2192;1.3816,-5.8596,-4.2724;1.0805,-5.2858,-3.0432;1.2956,-3.0514,-3.987;1.806,-2.9819,-6.0589;1.4324,-6.9471,-4.3691;.9198,-5.9203,-2.1672;.6273,-3.3487,-1.6373;-.3613,-3.8297,-.8746;-.7095,-4.8321,-1.1372;-.3694,-3.528,.5747;-.3598,-3.0511,3.3344;-.6597,-4.5627,1.473;-.0944,-2.2489,1.0699;-.0871,-2.0131,2.4404;-.6465,-4.3266,2.8466;-.8574,-5.57,1.0965;.1049,-1.4102,.4056;.1428,-1.0047,2.7951;-.8459,-5.1486,3.5349;-.3438,-2.8684,4.4129;1.2447,-1.7154,-3.9516;1.4217,-1.3163,-3.0536;.3561,3.6955,-1.1401;-2.1578,-2.962,-1.688;-2.9249,-3.1543,-.5345;-3.1001,-2.2932,.4136;-3.8308,-.7343,.6985;-4.7978,-.3083,-.8382;-2.5174,.4808,1.1905;-4.9694,-1.0805,2.1431;-3.4035,-4.3686,-.3076;-4.1023,-4.6244,.9013;-4.1517,-.0791,-1.7008;-5.4105,.5923,-.6498;-5.4787,-1.1308,-1.1239;-1.6515,.5727,.51;-2.1158,.2212,2.1855;-2.998,1.4737,1.2679;-5.4243,-.1391,2.5004;-5.7901,-1.7681,1.873;-4.4069,-1.5234,2.9846;-5.0391,-4.045,.9384;-3.4792,-4.3789,1.7752;-4.3308,-5.6985,.8859;4.2794,-2.1977,-.1728;4.127,-3.2788,-1.0528;3.4761,-4.4403,-.6544;2.9873,-4.5171,.6445;3.1418,-3.4733,1.5522;3.7789,-2.3117,1.1334;4.4829,-3.1912,-2.0825;3.3252,-5.2676,-1.3483;2.2526,-5.7118,1.0599;2.7378,-3.5697,2.5611;3.876,-1.473,1.8249;-.4974,4.0268,-.079;-1.8636,3.7926,-.1588;-2.3736,3.2212,-1.3195;-1.5603,2.9158,-2.4079;-.1954,3.1541,-2.3107;-.074,4.426,.8459;-2.5297,4.0212,.6736;-3.802,2.9012,-1.3857;-1.9977,2.481,-3.3073;.4553,2.8913,-3.1461;2.174,-5.9477,2.2449;1.7456,-6.3939,.1876;-4.2555,2.5364,-2.4493;-4.4536,3.0025,-.363;6.6772,.1698,-1.9437;5.9971,1.4162,-1.8198;7.8821,.1021,-2.6964;8.3805,1.2126,-3.3309;8.4,-.8591,-2.7706;9.3054,1.1486,-3.9108;6.5221,2.5397,-2.5182;7.6812,2.4408,-3.2499;5.9891,3.4916,-2.4758;8.0633,3.3181,-3.7796;4.5725,3.9109,-.2339;3.7464,5.062,-.0746;5.9067,3.9696,.2585;6.4042,5.1196,.8229;6.54,3.0828,.1903;7.4324,5.1386,1.1953;4.2944,6.2423,.4997;5.5964,6.2769,.9334;3.6519,7.1224,.6016;6.0062,7.1883,1.3776;-2.3955,-3.8964,-2.8582;-2.561,-4.9383,-2.5426;-3.2853,-3.5723,-3.4319;-1.536,-3.8736,-3.5469;-1.7308,-1.5689,-2.0642;-2.4781,-1.0912,-2.7234;-1.5577,-.9138,-1.1965;-.7893,-1.6043,-2.6356;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662828561866</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003907888059 0.000484713620 0.019622032406 0.005337506391</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056884853 -0.001473981 0.000186020 0.000292973 0.000354981 0.000381997 0.000438172 0.000501108 0.000602964 0.000675478 0.000804807 0.000895513 0.001063720 0.001134312 0.001283062 0.001320718 0.001377789 0.001523646 0.001794290 0.001993724 0.002289674 0.002405093 0.002589370 0.003133147 0.003373546 0.003746899 0.004107547 0.004345097 0.004627323 0.004660293 0.004968550 0.005197715 0.005893303 0.006018700 0.006641272 0.006774405 0.007029246 0.007283737 0.008096198 0.008292239 0.008535284 0.009165223 0.009680210 0.009924969 0.010914395 0.011122416 0.011308659 0.012011557 0.013177067 0.013376267 0.013842677 0.014547965 0.014860442 0.015435277 0.015714807 0.016391421 0.016463916 0.016842416 0.018155354 0.019144402 0.019825637 0.020253008 0.021022541 0.021575393 0.022097166 0.022683803 0.023343173 0.023589736 0.024451015 0.025821771 0.026330636 0.026566668 0.026995523 0.027166627 0.028012112 0.028746542 0.030459562 0.030710965 0.032637849 0.033048510 0.034329866 0.035693206 0.038814894 0.039160600 0.041811673 0.045350207 0.045488556 0.045800761 0.048487934 0.049366885 0.049682774 0.050139426 0.051525954 0.051956963 0.052014695 0.052283107 0.052382189 0.053156024 0.053348910 0.055340226 0.056269036 0.056504737 0.056610411 0.056966877 0.057571001 0.058323597 0.059162261 0.059508851 0.060764937 0.061927985 0.062202966 0.064097651 0.064201081 0.064824627 0.065492153 0.066802083 0.067672057 0.068832843 0.069984742 0.071776402 0.072092212 0.072479183 0.072888413 0.075286358 0.078038117 0.080503891 0.081301894 0.083119354 0.083294103 0.086448511 0.088527144 0.089292943 0.089762497 0.091241969 0.093205489 0.094463374 0.095423781 0.096073332 0.096787971 0.098069352 0.099966903 0.100342615 0.102424076 0.103235881 0.103771945 0.104815483 0.106817350 0.108320045 0.110579838 0.111853399 0.112622828 0.113306207 0.114284158 0.116085764 0.116747536 0.117647969 0.118471841 0.121767895 0.124422135 0.125400470 0.128317998 0.128595085 0.129997549 0.133250679 0.135967712 0.137270295 0.138292661 0.138536177 0.139796328 0.141671476 0.143455635 0.145549907 0.146158210 0.151625610 0.153215336 0.153325217 0.159925089 0.160829927 0.168351339 0.171295339 0.175502559 0.178714985 0.181261508 0.183826596 0.188572378 0.189090979 0.191190490 0.200578608 0.202081843 0.205847047 0.206841400 0.207200686 0.210478596 0.211859957 0.212512813 0.213436972 0.216495791 0.218242162 0.220553696 0.223945981 0.225398259 0.231788487 0.233691238 0.234621442 0.238306664 0.245128430 0.247248078 0.250847112 0.256398175 0.256776260 0.257280565 0.262251766 0.271513030 0.282670207 0.291720974 0.299565229 0.299891897 0.300868116 0.306986781 0.307724700 0.309603323 0.318446927 0.321172569 0.326261315 0.329169219 0.335259853 0.347577643 0.351790696 0.355570882 0.359497296 0.360542983 0.364039443 0.384126584 0.406686278 0.411796383 0.430133635 0.431745182 0.434371618 0.448973881 0.464360026 0.473562064 0.478524467 0.479092028 0.486400382 0.498809778 0.502570230 0.513912516 0.516315558 0.543642695 0.566749109 0.567486412 0.585641946 0.591801308 0.605626061 0.643354068 0.645172958 0.666103284 0.675505654 0.685559669 0.695287246 0.701075085 0.703177076 0.704273884 0.717068191 0.731474165 0.736888075 0.737981113 0.747183359 0.750741756 0.771602416 0.775954552 0.807599372 0.820207467 0.821656015 0.827978447 0.833873970 0.846588255 0.847308937 0.849568392 0.853823595 0.860345368 0.867433766 0.874986686 0.881173537 0.887259557 0.889633282 0.892417774 0.900801520 0.908568891 0.915475604 0.917642534 0.924390829 0.931687597 0.934829892 0.953735339 0.956644382 0.962093625 0.969608700 0.975199415 0.982187212 0.998505600 1.004347547 1.014183497 1.019673630 1.039477767 1.053884576 1.056079858 1.069243121 1.077930445 1.087075831 1.103262858 1.110242766 1.111580476 1.117935250 1.122496956 1.123501473 1.135492903 1.148220832 1.161651022 1.169953477 1.176514868 1.186506757 1.200633976 1.220628617 1.231101332 1.257263550 1.296274506 1.296450896 1.314627807 1.326333283 1.326692891 1.329858488 1.330915000 1.334640928 1.341414255 1.347636672 1.363764534 1.379460939 1.381086858 1.381557595 1.426368593 1.509698924 1.557872618 1.683841405 1.918136207</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">159</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93199726" y3="-0.95441136" z3="-0.66311708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63470543" y3="-1.94807757" z3="-1.49280079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11556272" y3="-0.99351959" z3="-1.36267171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79711173" y3="1.47894189" z3="-1.03827799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29657051" y3="0.31007265" z3="-0.49062822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67779688" y3="2.73344896" z3="-1.18386273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0185644" y3="2.73524403" z3="-0.84170426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37546602" y3="4.99352639" z3="-0.42764018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.82063504" y3="3.84715074" z3="-0.94607357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74301475" y3="5.86939977" z3="-0.25247379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.13011529" y3="1.6044405" z3="-1.71990082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12005213" y3="0.35165942" z3="0.20052443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72567845" y3="0.37988515" z3="-0.68797266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60211744" y3="0.73549065" z3="0.21478023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.69127738" y3="-0.86161917" z3="-1.55133095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08345698" y3="-2.46275767" z3="-1.35588459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.88386991" y3="-5.47071939" z3="-6.33646818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.64325208" y3="-5.03695024" z3="-5.36161147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.00710283" y3="-3.8986608" z3="-2.88667975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.61094506" y3="-3.65637629" z3="-5.21335171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.38818112" y3="-5.86445276" z3="-4.2653176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.08397257" y3="-5.2892267" z3="-3.03766098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30262497" y3="-3.05589217" z3="-3.98246769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.81782701" y3="-2.98844305" z3="-6.05319729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.43907519" y3="-6.95202943" z3="-4.36074841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92025533" y3="-5.9227048" z3="-2.16178824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.62927872" y3="-3.35115604" z3="-1.63373421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.36025495" y3="-3.83121803" z3="-0.8719018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70868285" y3="-4.83388726" z3="-1.13420071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37079412" y3="-3.52852596" z3="0.57729998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36542358" y3="-3.04784037" z3="3.33411836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66355621" y3="-4.56196938" z3="1.47438589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09361608" y3="-2.25144611" z3="1.07225341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.08829274" y3="-2.01291378" z3="2.44215364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65171701" y3="-4.32379434" z3="2.8475171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85575037" y3="-5.57272967" z3="1.09981717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09571291" y3="-1.40827154" z3="0.40128453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13992597" y3="-1.00392836" z3="2.79625419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.83771041" y3="-5.15063401" z3="3.54366964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34914267" y3="-2.8657468" z3="4.41254825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.25247807" y3="-1.71988603" z3="-3.94847734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42520232" y3="-1.31961414" z3="-3.05022035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35468171" y3="3.69656251" z3="-1.13183844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15639179" y3="-2.96362723" z3="-1.68990382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92475239" y3="-3.15407565" z3="-0.53698635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10088498" y3="-2.29085426" z3="0.409195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83187272" y3="-0.73250041" z3="0.69193772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.79059776" y3="-0.30396628" z3="-0.8498925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51851732" y3="0.47994561" z3="1.19136255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.97896828" y3="-1.07813837" z3="2.13005646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4033055" y3="-4.36834078" z3="-0.30766872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10349839" y3="-4.62150734" z3="0.90104896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.14003493" y3="-0.06803693" z3="-1.70731545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40820861" y3="0.59274477" z3="-0.66071308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.46653368" y3="-1.12790512" z3="-1.14352767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65098652" y3="0.57313639" z3="0.51302925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.11961109" y3="0.21677266" z3="2.18653378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99835314" y3="1.47290795" z3="1.27071002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.43449318" y3="-0.13588708" z3="2.48511148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.79945231" y3="-1.76406046" z3="1.85486057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.42202366" y3="-1.52231013" z3="2.97454389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04137874" y3="-4.04317182" z3="0.93488254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48178145" y3="-4.37286705" z3="1.7751133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33090723" y3="-5.6958282" z3="0.8879824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2811317" y3="-2.19816889" z3="-0.17486759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.12939727" y3="-3.2805628" z3="-1.0533514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.47901904" y3="-4.44167988" z3="-0.6536163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98892672" y3="-4.51606085" z3="0.64487283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14358953" y3="-3.4717033" z3="1.55157579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78135794" y3="-2.31126673" z3="1.13182182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.485041" y3="-3.19418517" z3="-2.08332299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.32947689" y3="-5.27077423" z3="-1.34627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2520388" y3="-5.70996695" z3="1.06075621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7396604" y3="-3.56707925" z3="2.56056664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87910937" y3="-1.47260753" z3="1.82283818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49755749" y3="4.02652628" z3="-0.06933781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86411989" y3="3.79425864" z3="-0.14835492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.37601186" y3="3.22702321" z3="-1.31041686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56378778" y3="2.9226921" z3="-2.39984502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.19850699" y3="3.15866884" z3="-2.30323225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07292062" y3="4.42320914" z3="0.8560161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52908962" y3="4.02155082" z3="0.6853462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80482271" y3="2.90923745" z3="-1.3762386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.00266038" y3="2.49109671" z3="-3.3002352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.45115717" y3="2.89729019" z3="-3.13991162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1609334" y3="-5.93737207" z3="2.24535007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75588589" y3="-6.40099641" z3="0.18993488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.26005565" y3="2.55009871" z3="-2.44105904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4549029" y3="3.00609048" z3="-0.35207151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6729297" y3="0.17028676" z3="-1.95264385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.99319539" y3="1.41655748" z3="-1.82600411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.87540165" y3="0.10307779" z3="-2.70924176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.37185785" y3="1.2140801" z3="-3.34450702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.39317926" y3="-0.8580131" z3="-2.78587732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.29492704" y3="1.15039941" z3="-3.92736242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.51598723" y3="2.54064244" z3="-2.52503324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.67286496" y3="2.44225446" z3="-3.26028169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.98302737" y3="3.49247876" z3="-2.48024094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.0533073" y3="3.31988758" z3="-3.79043461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57284798" y3="3.90941902" z3="-0.23319005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7470825" y3="5.06018802" z3="-0.07007929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90829164" y3="3.96738479" z3="0.2558073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.40702997" y3="5.11648314" z3="0.82089211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54151777" y3="3.08089592" z3="0.18443412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.43608395" y3="5.13494792" z3="1.19063565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29637658" y3="6.23949059" z3="0.50494513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.59934182" y3="6.27348789" z3="0.9354663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65399119" y3="7.11929678" z3="0.60992302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0101325" y3="7.18409159" z3="1.38029052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.39186459" y3="-3.89887636" z3="-2.85953749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.56282417" y3="-4.93882311" z3="-2.54411464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27604821" y3="-3.57105741" z3="-3.43628363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.53016381" y3="-3.88132296" z3="-3.54517954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72861844" y3="-1.57066198" z3="-2.06740937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47453261" y3="-1.09393463" z3="-2.72946468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55631213" y3="-0.91450229" z3="-1.20076581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78564914" y3="-1.60766071" z3="-2.63669318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.932,-.9544,-.6631;6.6347,-1.9481,-1.4928;6.1156,-.9935,-1.3627;4.7971,1.4789,-1.0383;4.2966,.3101,-.4906;2.6778,2.7334,-1.1839;4.0186,2.7352,-.8417;2.3755,4.9935,-.4276;1.8206,3.8472,-.9461;1.743,5.8694,-.2525;2.1301,1.6044,-1.7199;3.1201,.3517,.2005;1.7257,.3799,-.688;.6021,.7355,.2148;1.6913,-.8616,-1.5513;1.0835,-2.4628,-1.3559;1.8839,-5.4707,-6.3365;1.6433,-5.037,-5.3616;1.0071,-3.8987,-2.8867;1.6109,-3.6564,-5.2134;1.3882,-5.8645,-4.2653;1.084,-5.2892,-3.0377;1.3026,-3.0559,-3.9825;1.8178,-2.9884,-6.0532;1.4391,-6.952,-4.3607;.9203,-5.9227,-2.1618;.6293,-3.3512,-1.6337;-.3603,-3.8312,-.8719;-.7087,-4.8339,-1.1342;-.3708,-3.5285,.5773;-.3654,-3.0478,3.3341;-.6636,-4.562,1.4744;-.0936,-2.2514,1.0723;-.0883,-2.0129,2.4422;-.6517,-4.3238,2.8475;-.8558,-5.5727,1.0998;.0957,-1.4083,.4013;.1399,-1.0039,2.7963;-.8377,-5.1506,3.5437;-.3491,-2.8657,4.4125;1.2525,-1.7199,-3.9485;1.4252,-1.3196,-3.0502;.3547,3.6966,-1.1318;-2.1564,-2.9636,-1.6899;-2.9248,-3.1541,-.537;-3.1009,-2.2909,.4092;-3.8319,-.7325,.6919;-4.7906,-.304,-.8499;-2.5185,.4799,1.1914;-4.979,-1.0781,2.1301;-3.4033,-4.3683,-.3077;-4.1035,-4.6215,.901;-4.14,-.068,-1.7073;-5.4082,.5927,-.6607;-5.4665,-1.1279,-1.1435;-1.651,.5731,.513;-2.1196,.2168,2.1865;-2.9984,1.4729,1.2707;-5.4345,-.1359,2.4851;-5.7995,-1.7641,1.8549;-4.422,-1.5223,2.9745;-5.0414,-4.0432,.9349;-3.4818,-4.3729,1.7751;-4.3309,-5.6958,.888;4.2811,-2.1982,-.1749;4.1294,-3.2806,-1.0534;3.479,-4.4417,-.6536;2.9889,-4.5161,.6449;3.1436,-3.4717,1.5516;3.7814,-2.3113,1.1318;4.485,-3.1942,-2.0833;3.3295,-5.2708,-1.3463;2.252,-5.71,1.0608;2.7397,-3.5671,2.5606;3.8791,-1.4726,1.8228;-.4976,4.0265,-.0693;-1.8641,3.7943,-.1484;-2.376,3.227,-1.3104;-1.5638,2.9227,-2.3998;-.1985,3.1587,-2.3032;-.0729,4.4232,.856;-2.5291,4.0216,.6853;-3.8048,2.9092,-1.3762;-2.0027,2.4911,-3.3002;.4512,2.8973,-3.1399;2.1609,-5.9374,2.2454;1.7559,-6.401,.1899;-4.2601,2.5501,-2.4411;-4.4549,3.0061,-.3521;6.6729,.1703,-1.9526;5.9932,1.4166,-1.826;7.8754,.1031,-2.7092;8.3719,1.2141,-3.3445;8.3932,-.858,-2.7859;9.2949,1.1504,-3.9274;6.516,2.5406,-2.525;7.6729,2.4423,-3.2603;5.983,3.4925,-2.4802;8.0533,3.3199,-3.7904;4.5728,3.9094,-.2332;3.7471,5.0602,-.0701;5.9083,3.9674,.2558;6.407,5.1165,.8209;6.5415,3.0809,.1844;7.4361,5.1349,1.1906;4.2964,6.2395,.5049;5.5993,6.2735,.9355;3.654,7.1193,.6099;6.0101,7.1841,1.3803;-2.3919,-3.8989,-2.8595;-2.5628,-4.9388,-2.5441;-3.276,-3.5711,-3.4363;-1.5302,-3.8813,-3.5452;-1.7286,-1.5707,-2.0674;-2.4745,-1.0939,-2.7295;-1.5563,-.9145,-1.2008;-.7856,-1.6077,-2.6367;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662833679040</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005794856944 0.000626952588 0.021063772557 0.005338373582</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885543 -0.002157826 0.000189730 0.000313121 0.000361945 0.000382522 0.000442096 0.000502010 0.000605009 0.000683174 0.000804985 0.000895598 0.001065898 0.001134481 0.001283078 0.001320950 0.001380522 0.001523963 0.001794575 0.002004129 0.002292326 0.002422625 0.002591553 0.003133636 0.003375673 0.003751118 0.004111385 0.004348283 0.004627901 0.004690991 0.004968220 0.005197954 0.005893552 0.006019175 0.006640417 0.006794772 0.007028039 0.007285179 0.008101833 0.008331334 0.008767454 0.009178306 0.009680251 0.009967639 0.010916164 0.011124074 0.011309877 0.012018127 0.013177141 0.013378122 0.013843232 0.014547531 0.014861615 0.015438943 0.015715867 0.016391182 0.016468418 0.016844712 0.018191002 0.019144017 0.019828175 0.020253803 0.021022816 0.021578454 0.022097203 0.022683689 0.023343073 0.023590565 0.024455457 0.025822275 0.026330664 0.026569273 0.026997879 0.027168601 0.028030124 0.028752154 0.030561100 0.030817053 0.032641860 0.033121086 0.034330128 0.035695619 0.038815619 0.039161290 0.041811706 0.045350582 0.045491557 0.045796803 0.048492324 0.049391008 0.049683623 0.050139860 0.051526384 0.051990752 0.052017415 0.052283150 0.052382158 0.053320461 0.053410562 0.055354755 0.056273217 0.056509955 0.056611177 0.056966834 0.057573437 0.058327458 0.059161783 0.059527017 0.060765101 0.061927865 0.062268759 0.064104588 0.064203703 0.064824859 0.065502856 0.066806958 0.067674959 0.068832717 0.070038635 0.071776505 0.072092180 0.072479623 0.072888237 0.075286629 0.078092094 0.080514684 0.081323964 0.083119913 0.083294801 0.086448843 0.088527458 0.089292919 0.089762750 0.091247539 0.093206229 0.094466034 0.095427577 0.096073675 0.096788563 0.098069245 0.099970523 0.100343583 0.102432781 0.103249679 0.103788300 0.104830235 0.107659038 0.109112637 0.110657889 0.111865903 0.112856798 0.113462726 0.114315519 0.116089998 0.116747373 0.117708359 0.118471887 0.121767644 0.124422622 0.125400570 0.128326318 0.128612451 0.130051496 0.133290126 0.135975265 0.137284166 0.138314176 0.138545965 0.139798473 0.141671631 0.143456155 0.145549953 0.146159728 0.151625472 0.153216501 0.153330264 0.159926127 0.160830248 0.168353844 0.171295167 0.175534403 0.178717573 0.181262168 0.183826337 0.188582031 0.189091153 0.191196331 0.200588361 0.202089108 0.205875105 0.206841358 0.207202273 0.210515786 0.211861387 0.212513018 0.213437108 0.216495882 0.218242134 0.220553612 0.223962078 0.225398541 0.231791585 0.233846261 0.234632183 0.238307169 0.245130144 0.247250398 0.250917840 0.256410841 0.256841523 0.257285914 0.262252309 0.271514992 0.282670224 0.291722276 0.299567271 0.299892870 0.300881371 0.306989259 0.307725167 0.309603380 0.318490965 0.321174423 0.326261924 0.329173742 0.335259863 0.347585032 0.351792853 0.355570974 0.359497200 0.360543978 0.364041872 0.384152578 0.406689642 0.411799150 0.430133434 0.431767247 0.434398904 0.449006581 0.464368624 0.473571894 0.478568297 0.479198909 0.486408770 0.498812499 0.502609429 0.513918702 0.516315354 0.543653359 0.566760758 0.567501062 0.585736583 0.591802153 0.605627712 0.643405694 0.645176384 0.666306061 0.675508592 0.685580751 0.697132288 0.701075055 0.703180967 0.704277380 0.717068713 0.731475177 0.736887628 0.737981571 0.747185369 0.750741760 0.771602437 0.775954563 0.807757328 0.820584330 0.821656205 0.827986223 0.833874362 0.846591633 0.847310473 0.849668825 0.853844670 0.860517314 0.867435884 0.874987337 0.881173263 0.887259684 0.889634486 0.892418661 0.900801926 0.908568599 0.915485353 0.917642617 0.924390973 0.931687653 0.934830797 0.953769992 0.956663557 0.962095831 0.969608644 0.975204805 0.982187363 0.998505764 1.004349032 1.014308802 1.019883473 1.039568686 1.054663230 1.057623191 1.069243148 1.078088102 1.087076123 1.103262872 1.110242766 1.111581090 1.117965594 1.122497038 1.123501519 1.135750526 1.148223901 1.161651692 1.169953507 1.176514936 1.186546954 1.200634205 1.220630774 1.231101553 1.257368302 1.296275276 1.296451455 1.314629245 1.326336924 1.326693826 1.329862071 1.330946909 1.334641779 1.341426564 1.347690408 1.363846763 1.379473227 1.381088023 1.381557554 1.426379019 1.509731938 1.557872798 1.683964241 1.918144374</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">160</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.93068145" y3="-0.95499463" z3="-0.66693022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.63176043" y3="-1.94798043" z3="-1.50094048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.11260893" y3="-0.99363366" z3="-1.36939459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79496077" y3="1.47857495" z3="-1.04096004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2955468" y3="0.30947033" z3="-0.49271821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67563968" y3="2.73376355" z3="-1.1808773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01716981" y3="2.73482803" z3="-0.84149235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37561888" y3="4.99275477" z3="-0.42077914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81939116" y3="3.84739889" z3="-0.93998065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74371404" y3="5.86848848" z3="-0.24305125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.12641264" y3="1.60541981" z3="-1.71687977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12043126" y3="0.35108664" z3="0.2008661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72411372" y3="0.38014693" z3="-0.68488418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60247612" y3="0.73546576" z3="0.22037348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68798477" y3="-0.86098971" z3="-1.54867085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08363564" y3="-2.46338316" z3="-1.35404523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.89667477" y3="-5.47654772" z3="-6.32886458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.65310021" y3="-5.04184135" z3="-5.35525823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01049113" y3="-3.90122469" z3="-2.88325939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6213634" y3="-3.661215" z3="-5.20807378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.39372839" y3="-5.86827072" z3="-4.25932237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.08634794" y3="-5.29191751" z3="-3.03312197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.30961426" y3="-3.05951592" z3="-3.97874906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.83143456" y3="-2.99413187" z3="-6.04762572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.44390546" y3="-6.95587628" z3="-4.35377572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.91985799" y3="-5.92465038" z3="-2.15722468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63076403" y3="-3.35266211" z3="-1.6315146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35979853" y3="-3.83251308" z3="-0.87045901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70744491" y3="-4.83555201" z3="-1.13191121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3706722" y3="-3.52869259" z3="0.57845615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.36326494" y3="-3.04748173" z3="3.3378077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.65932782" y3="-4.56268063" z3="1.47875331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.0987091" y3="-2.2478992" z3="1.07144229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09236499" y3="-2.00993555" z3="2.44159993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.64691934" y3="-4.32464679" z3="2.85222811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8555177" y3="-5.57036881" z3="1.10364085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10087606" y3="-1.41085809" z3="0.40657518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13573618" y3="-1.00046023" z3="2.79450235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8460004" y3="-5.14525556" z3="3.54072125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.34860332" y3="-2.86248424" z3="4.415973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.26023705" y3="-1.72350501" z3="-3.94607858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.42935698" y3="-1.322147" z3="-3.04779126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35302409" y3="3.69819359" z3="-1.12396246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15425614" y3="-2.96573488" z3="-1.69107109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92381049" y3="-3.15443918" z3="-0.53846294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10151017" y3="-2.28969447" z3="0.40582175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83364179" y3="-0.73000002" z3="0.68414441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.78316112" y3="-0.29939633" z3="-0.86184937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52155928" y3="0.47963679" z3="1.19095478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-4.98911675" y3="-1.07457716" z3="2.11469349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40217712" y3="-4.36823983" z3="-0.30744332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10302953" y3="-4.61943604" z3="0.90130242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.1283905" y3="-0.05583327" z3="-1.71310474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.4069396" y3="0.59291464" z3="-0.67248068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.45183704" y3="-1.12536097" z3="-1.16394723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65251216" y3="0.57253132" z3="0.51483986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.12606925" y3="0.21358556" z3="2.1865066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0003133" y3="1.47341832" z3="1.27091507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.44506859" y3="-0.13187747" z3="2.46759428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8089263" y3="-1.75865792" z3="1.8337968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.43868512" y3="-1.52066208" z3="2.96204007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04159484" y3="-4.04186715" z3="0.93335764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48224568" y3="-4.36863045" z3="1.77531692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32937249" y3="-5.69396055" z3="0.89042264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28081693" y3="-2.19874313" z3="-0.17736655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13025336" y3="-3.28253313" z3="-1.0543003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48043203" y3="-4.44361557" z3="-0.65326895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.98895179" y3="-4.5163868" z3="0.64482535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14222034" y3="-3.47023229" z3="1.54992757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78022675" y3="-2.31023391" z3="1.12920301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48699508" y3="-3.19776875" z3="-2.08403235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33276908" y3="-5.27400381" z3="-1.34457449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25523736" y3="-5.71200342" z3="1.06361576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73766777" y3="-3.56441192" z3="2.55875717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87785402" y3="-1.4708484" z3="1.81946132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49747719" y3="4.02599218" z3="-0.05917283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86449129" y3="3.79605929" z3="-0.13745362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.378382" y3="3.23310173" z3="-1.3004837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.56794795" y3="2.93093065" z3="-2.39210896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20214931" y3="3.16430166" z3="-2.29621216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.07093265" y3="4.41902396" z3="0.8670599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52838608" y3="4.02202992" z3="0.69736098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.80792661" y3="2.91818219" z3="-1.36625229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.00835692" y3="2.50267742" z3="-3.29316269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44636627" y3="2.90410796" z3="-3.13412091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16749901" y3="-5.93985163" z3="2.25008139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75965573" y3="-6.40463924" z3="0.19354681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.26506797" y3="2.56516805" z3="-2.43185532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45639905" y3="3.01020156" z3="-0.34077445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66831924" y3="0.17040392" z3="-1.96069088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98902712" y3="1.41663061" z3="-1.83172287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.86854741" y3="0.10357729" z3="-2.72092853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.36317483" y3="1.21488747" z3="-3.35724601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.38602332" y3="-0.85747213" z3="-2.79962934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.28441676" y3="1.1514487" z3="-3.94303117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50997176" y3="2.54114817" z3="-2.53155885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.66466047" y3="2.4431008" z3="-3.27029668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9772041" y3="3.49296903" z3="-2.48465181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.04367755" y3="3.32099512" z3="-3.80114883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57319157" y3="3.90795201" z3="-0.23252926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7480354" y3="5.05854777" z3="-0.06578079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.90985306" y3="3.9649013" z3="0.25354136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41020379" y3="5.11293571" z3="0.81942099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54274232" y3="3.07849411" z3="0.17928652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44018726" y3="5.13064306" z3="1.18687777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.29893429" y3="6.23672797" z3="0.51005857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60297577" y3="6.26978505" z3="0.93775692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65694092" y3="7.11640403" z3="0.61796463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.01504174" y3="7.1795245" z3="1.38320405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38885701" y3="-3.90335208" z3="-2.85908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55857644" y3="-4.94364566" z3="-2.5398759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.27515014" y3="-3.5795132" z3="-3.43851744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52618784" y3="-3.88585135" z3="-3.54383366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72561993" y3="-1.57384759" z3="-2.07038629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.47042991" y3="-1.09819565" z3="-2.73371277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55532234" y3="-0.91550031" z3="-1.20408849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.78156837" y3="-1.61153164" z3="-2.63783035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9307,-.955,-.6669;6.6318,-1.948,-1.5009;6.1126,-.9936,-1.3694;4.795,1.4786,-1.041;4.2955,.3095,-.4927;2.6756,2.7338,-1.1809;4.0172,2.7348,-.8415;2.3756,4.9928,-.4208;1.8194,3.8474,-.94;1.7437,5.8685,-.2431;2.1264,1.6054,-1.7169;3.1204,.3511,.2009;1.7241,.3801,-.6849;.6025,.7355,.2204;1.688,-.861,-1.5487;1.0836,-2.4634,-1.354;1.8967,-5.4765,-6.3289;1.6531,-5.0418,-5.3553;1.0105,-3.9012,-2.8833;1.6214,-3.6612,-5.2081;1.3937,-5.8683,-4.2593;1.0863,-5.2919,-3.0331;1.3096,-3.0595,-3.9787;1.8314,-2.9941,-6.0476;1.4439,-6.9559,-4.3538;.9199,-5.9247,-2.1572;.6308,-3.3527,-1.6315;-.3598,-3.8325,-.8705;-.7074,-4.8356,-1.1319;-.3707,-3.5287,.5785;-.3633,-3.0475,3.3378;-.6593,-4.5627,1.4788;-.0987,-2.2479,1.0714;-.0924,-2.0099,2.4416;-.6469,-4.3246,2.8522;-.8555,-5.5704,1.1036;.1009,-1.4109,.4066;.1357,-1.0005,2.7945;-.846,-5.1453,3.5407;-.3486,-2.8625,4.416;1.2602,-1.7235,-3.9461;1.4294,-1.3221,-3.0478;.353,3.6982,-1.124;-2.1543,-2.9657,-1.6911;-2.9238,-3.1544,-.5385;-3.1015,-2.2897,.4058;-3.8336,-.73,.6841;-4.7832,-.2994,-.8618;-2.5216,.4796,1.191;-4.9891,-1.0746,2.1147;-3.4022,-4.3682,-.3074;-4.103,-4.6194,.9013;-4.1284,-.0558,-1.7131;-5.4069,.5929,-.6725;-5.4518,-1.1254,-1.1639;-1.6525,.5725,.5148;-2.1261,.2136,2.1865;-3.0003,1.4734,1.2709;-5.4451,-.1319,2.4676;-5.8089,-1.7587,1.8338;-4.4387,-1.5207,2.962;-5.0416,-4.0419,.9334;-3.4822,-4.3686,1.7753;-4.3294,-5.694,.8904;4.2808,-2.1987,-.1774;4.1303,-3.2825,-1.0543;3.4804,-4.4436,-.6533;2.989,-4.5164,.6448;3.1422,-3.4702,1.5499;3.7802,-2.3102,1.1292;4.487,-3.1978,-2.084;3.3328,-5.274,-1.3446;2.2552,-5.712,1.0636;2.7377,-3.5644,2.5588;3.8779,-1.4708,1.8195;-.4975,4.026,-.0592;-1.8645,3.7961,-.1375;-2.3784,3.2331,-1.3005;-1.5679,2.9309,-2.3921;-.2021,3.1643,-2.2962;-.0709,4.419,.8671;-2.5284,4.022,.6974;-3.8079,2.9182,-1.3663;-2.0084,2.5027,-3.2932;.4464,2.9041,-3.1341;2.1675,-5.9399,2.2501;1.7597,-6.4046,.1935;-4.2651,2.5652,-2.4319;-4.4564,3.0102,-.3408;6.6683,.1704,-1.9607;5.989,1.4166,-1.8317;7.8685,.1036,-2.7209;8.3632,1.2149,-3.3572;8.386,-.8575,-2.7996;9.2844,1.1514,-3.943;6.51,2.5411,-2.5316;7.6647,2.4431,-3.2703;5.9772,3.493,-2.4847;8.0437,3.321,-3.8011;4.5732,3.908,-.2325;3.748,5.0585,-.0658;5.9099,3.9649,.2535;6.4102,5.1129,.8194;6.5427,3.0785,.1793;7.4402,5.1306,1.1869;4.2989,6.2367,.5101;5.603,6.2698,.9378;3.6569,7.1164,.618;6.015,7.1795,1.3832;-2.3889,-3.9034,-2.8591;-2.5586,-4.9436,-2.5399;-3.2752,-3.5795,-3.4385;-1.5262,-3.8859,-3.5438;-1.7256,-1.5738,-2.0704;-2.4704,-1.0982,-2.7337;-1.5553,-.9155,-1.2041;-.7816,-1.6115,-2.6378;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662844951299</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006816044666 0.000661660635 0.020522892492 0.005337254323</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885294 -0.002176755 0.000193663 0.000317246 0.000361938 0.000382699 0.000444416 0.000501884 0.000604990 0.000686057 0.000807228 0.000896372 0.001065854 0.001134505 0.001283172 0.001321816 0.001380596 0.001523985 0.001794620 0.002004872 0.002292528 0.002428435 0.002591275 0.003133492 0.003378364 0.003751270 0.004111231 0.004349259 0.004628580 0.004693394 0.004977901 0.005199559 0.005893578 0.006019377 0.006659897 0.006793424 0.007036676 0.007286896 0.008104533 0.008332952 0.008774433 0.009184954 0.009680978 0.009980974 0.010918412 0.011135449 0.011310103 0.012023174 0.013177273 0.013379284 0.013843144 0.014550526 0.014861944 0.015444443 0.015718141 0.016392560 0.016475577 0.016845636 0.018251621 0.019146483 0.019827692 0.020256804 0.021023150 0.021578523 0.022097235 0.022684107 0.023343010 0.023593964 0.024462659 0.025823238 0.026330471 0.026572083 0.027002560 0.027173412 0.028040278 0.028752425 0.030625420 0.030902311 0.032645840 0.033197456 0.034330462 0.035703977 0.038816915 0.039164352 0.041813587 0.045352307 0.045491422 0.045795525 0.048497734 0.049409708 0.049693633 0.050140220 0.051526410 0.052005293 0.052031292 0.052283194 0.052382156 0.053333586 0.053613650 0.055369776 0.056281348 0.056523745 0.056612437 0.056966962 0.057575834 0.058329520 0.059162409 0.059556364 0.060765313 0.061927923 0.062338237 0.064121624 0.064204122 0.064825543 0.065524607 0.066815292 0.067679525 0.068832712 0.070089872 0.071776908 0.072091640 0.072486008 0.072888735 0.075287220 0.078147902 0.080540043 0.081345347 0.083126877 0.083298559 0.086450479 0.088527594 0.089293299 0.089764746 0.091257641 0.093206341 0.094471833 0.095427841 0.096073927 0.096788680 0.098070110 0.099973195 0.100344919 0.102434008 0.103252419 0.103793894 0.104839463 0.107861689 0.110025866 0.110985585 0.111883240 0.113081156 0.114005684 0.114546920 0.116100116 0.116748916 0.117841455 0.118471661 0.121767653 0.124422617 0.125401356 0.128335448 0.128662368 0.130137274 0.133327947 0.135992507 0.137303823 0.138329003 0.138554747 0.139802858 0.141671758 0.143458489 0.145550990 0.146159786 0.151628034 0.153217440 0.153334238 0.159930599 0.160830291 0.168362922 0.171296051 0.175570883 0.178719836 0.181263572 0.183826676 0.188595618 0.189091401 0.191202296 0.200597424 0.202091025 0.205911338 0.206841777 0.207204420 0.210545595 0.211861359 0.212513149 0.213437370 0.216496002 0.218242112 0.220553895 0.223978227 0.225399049 0.231792765 0.233999586 0.234645879 0.238307806 0.245128919 0.247254289 0.251000900 0.256427383 0.256947859 0.257307972 0.262252466 0.271516739 0.282670420 0.291723178 0.299569174 0.299893463 0.300882872 0.306989112 0.307725618 0.309603658 0.318557913 0.321176164 0.326262763 0.329176212 0.335260322 0.347585860 0.351798621 0.355571204 0.359499529 0.360547567 0.364041939 0.384152973 0.406689535 0.411800184 0.430134019 0.431781025 0.434416428 0.449047949 0.464374869 0.473571847 0.478577579 0.479347996 0.486430511 0.498819963 0.502644780 0.513924409 0.516317866 0.543664840 0.566782589 0.567527315 0.585858005 0.591801706 0.605628265 0.643448668 0.645185426 0.666547921 0.675511710 0.685611036 0.699398492 0.701075075 0.703204987 0.704281306 0.717069247 0.731475120 0.736890791 0.737981661 0.747184910 0.750741761 0.771602472 0.775954566 0.807899643 0.821046974 0.821656434 0.827992217 0.833877062 0.846592993 0.847313709 0.849791645 0.853878418 0.860759524 0.867440190 0.874989790 0.881173139 0.887260364 0.889646087 0.892422011 0.900803585 0.908569708 0.915486059 0.917642329 0.924391222 0.931687664 0.934834044 0.953826568 0.956698214 0.962096629 0.969608647 0.975211146 0.982192739 0.998507650 1.004350360 1.014444329 1.020121087 1.039689072 1.054913087 1.060541644 1.069243115 1.078303235 1.087077819 1.103263596 1.110242915 1.111581724 1.118010961 1.122497072 1.123501666 1.136124678 1.148225850 1.161652082 1.169953564 1.176515218 1.186575045 1.200634569 1.220632537 1.231102034 1.257520594 1.296277444 1.296454215 1.314631022 1.326338358 1.326697652 1.329864261 1.330952939 1.334641909 1.341441983 1.347749664 1.363957878 1.379490402 1.381092667 1.381557573 1.426386688 1.509730757 1.557873245 1.684227717 1.918149441</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">161</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92874955" y3="-0.95532259" z3="-0.6708276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.62794494" y3="-1.94818137" z3="-1.50897086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10899847" y3="-0.99388192" z3="-1.37623613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79268197" y3="1.47835981" z3="-1.04415634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29430734" y3="0.30929159" z3="-0.49500567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67360235" y3="2.7344551" z3="-1.17815371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01587982" y3="2.73477496" z3="-0.84196291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37572252" y3="4.99238836" z3="-0.41357777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81809445" y3="3.84795876" z3="-0.93342655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74434566" y3="5.86798425" z3="-0.23282524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.1229028" y3="1.60671135" z3="-1.71401623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12078332" y3="0.35142033" z3="0.20117937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72275814" y3="0.38103018" z3="-0.68170434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60296908" y3="0.73600223" z3="0.22594385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68473895" y3="-0.85981952" z3="-1.54578082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08549851" y3="-2.46407975" z3="-1.35123621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.90803895" y3="-5.48175338" z3="-6.32208689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.66257043" y3="-5.04632944" z3="-5.34919064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.01532461" y3="-3.90373926" z3="-2.87903042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.63144732" y3="-3.66557287" z3="-5.20293991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.40020826" y3="-5.87197102" z3="-4.25312659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09080331" y3="-5.29468" z3="-3.02780052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.31711554" y3="-3.06285871" z3="-3.97463283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.84401505" y3="-2.99909228" z3="-6.04251409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.44964192" y3="-6.95971913" z3="-4.34681518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92267451" y3="-5.92692831" z3="-2.15170261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63377412" y3="-3.35407486" z3="-1.62820922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35666508" y3="-3.83402746" z3="-0.8672512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.7042113" y3="-4.83693947" z3="-1.1289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37010663" y3="-3.52896534" z3="0.5814118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3688511" y3="-3.04407454" z3="3.33761356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66319368" y3="-4.56097886" z3="1.47946994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09522526" y3="-2.25073314" z3="1.07490196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09174099" y3="-2.0101364" z3="2.4444452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65400628" y3="-4.3203745" z3="2.8521633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85399115" y3="-5.57262276" z3="1.10632098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09569817" y3="-1.40909672" z3="0.40355015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13492387" y3="-1.00014155" z3="2.79692126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84164646" y3="-5.14585405" z3="3.54909172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.35368184" y3="-2.86063551" z3="4.41592266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.2683759" y3="-1.72679529" z3="-3.94352783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43369928" y3="-1.3239585" z3="-3.04508901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.35136709" y3="3.69971419" z3="-1.11523829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.15182308" y3="-2.96830523" z3="-1.69162476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92309434" y3="-3.15509318" z3="-0.54031024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10306405" y3="-2.28828622" z3="0.40190705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83477941" y3="-0.72842595" z3="0.67677844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.77563457" y3="-0.2945162" z3="-0.87389544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52308364" y3="0.47850241" z3="1.19126362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.00015107" y3="-1.07207534" z3="2.10020622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40162502" y3="-4.36864113" z3="-0.30824873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10337332" y3="-4.61809705" z3="0.90027994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.11525063" y3="-0.04538947" z3="-1.71973755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40418291" y3="0.59493832" z3="-0.68571014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.43943661" y3="-1.12160922" z3="-1.18447012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65189701" y3="0.57217584" z3="0.51767518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13074641" y3="0.20926744" z3="2.18738848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00095983" y3="1.47221327" z3="1.27318865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.45654586" y3="-0.12871437" z3="2.45071839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.81934019" y3="-1.75451974" z3="1.81338134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.45600128" y3="-1.5195674" z3="2.95091424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04181698" y3="-4.04059955" z3="0.93070409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48300166" y3="-4.36525568" z3="1.77410466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3292171" y3="-5.69280757" z3="0.89131921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28059623" y3="-2.19931092" z3="-0.1793503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13219825" y3="-3.28521496" z3="-1.05429122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48439903" y3="-4.44696952" z3="-0.65123576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99311219" y3="-4.51875645" z3="0.64698587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14417096" y3="-3.47054728" z3="1.55015938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77982909" y3="-2.30961071" z3="1.12728785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48826425" y3="-3.20141903" z3="-2.08430877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3366585" y3="-5.27784533" z3="-1.34157995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2562222" y3="-5.71106082" z3="1.0653611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73838356" y3="-3.56274661" z3="2.55871056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87467974" y3="-1.46822334" z3="1.81585298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49757928" y3="4.02557916" z3="-0.04893297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86504066" y3="3.79781642" z3="-0.12654925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38117468" y3="3.23942845" z3="-1.29100166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.5720019" y3="2.93859677" z3="-2.38352602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20577765" y3="3.16953826" z3="-2.28826482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06984259" y3="4.41588055" z3="0.87757566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52750914" y3="4.02200367" z3="0.71013337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81103476" y3="2.92665819" z3="-1.35598654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01409419" y3="2.5138475" z3="-3.28554489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.44135614" y3="2.91103931" z3="-3.12799596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16510242" y3="-5.93601959" z3="2.25065251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75850058" y3="-6.40188364" z3="0.1949967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2702365" y3="2.58067681" z3="-2.42332755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45803438" y3="3.01385414" z3="-0.32925159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.66328568" y3="0.1700938" z3="-1.96897777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98458729" y3="1.41643114" z3="-1.83797763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.86134595" y3="0.10328906" z3="-2.7326437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.35414035" y3="1.21463761" z3="-3.37030526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.37855465" y3="-0.85777464" z3="-2.81301457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2735843" y3="1.15116717" z3="-3.95889681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.50367018" y3="2.54110159" z3="-2.53888802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6561264" y3="2.44300694" z3="-3.28105876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.97118522" y3="3.4930218" z3="-2.49002739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.03369769" y3="3.32093007" z3="-3.81287571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57367715" y3="3.90692647" z3="-0.23276202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74904171" y3="5.05739702" z3="-0.06187989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91160569" y3="3.96286951" z3="0.2498678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.41345401" y3="5.10986263" z3="0.81657958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54425592" y3="3.07647475" z3="0.17226405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44434357" y3="5.1268278" z3="1.18143389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30151277" y3="6.23451694" z3="0.51470288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.60658221" y3="6.26663876" z3="0.93922267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.65993007" y3="7.1141571" z3="0.62584737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.01983088" y3="7.17553438" z3="1.38536453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38466191" y3="-3.90762315" z3="-2.85852147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55500708" y3="-4.94693591" z3="-2.54030216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26913863" y3="-3.58307859" z3="-3.43781131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.52146685" y3="-3.88992917" z3="-3.54267022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.72259374" y3="-1.57669996" z3="-2.07187208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46651011" y3="-1.10194865" z3="-2.73763998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55272158" y3="-0.91850975" z3="-1.20645743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77810737" y3="-1.61497584" z3="-2.63814126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9287,-.9553,-.6708;6.6279,-1.9482,-1.509;6.109,-.9939,-1.3762;4.7927,1.4784,-1.0442;4.2943,.3093,-.495;2.6736,2.7345,-1.1782;4.0159,2.7348,-.842;2.3757,4.9924,-.4136;1.8181,3.848,-.9334;1.7443,5.868,-.2328;2.1229,1.6067,-1.714;3.1208,.3514,.2012;1.7228,.381,-.6817;.603,.736,.2259;1.6847,-.8598,-1.5458;1.0855,-2.4641,-1.3512;1.908,-5.4818,-6.3221;1.6626,-5.0463,-5.3492;1.0153,-3.9037,-2.879;1.6314,-3.6656,-5.2029;1.4002,-5.872,-4.2531;1.0908,-5.2947,-3.0278;1.3171,-3.0629,-3.9746;1.844,-2.9991,-6.0425;1.4496,-6.9597,-4.3468;.9227,-5.9269,-2.1517;.6338,-3.3541,-1.6282;-.3567,-3.834,-.8673;-.7042,-4.8369,-1.1289;-.3701,-3.529,.5814;-.3689,-3.0441,3.3376;-.6632,-4.561,1.4795;-.0952,-2.2507,1.0749;-.0917,-2.0101,2.4444;-.654,-4.3204,2.8522;-.854,-5.5726,1.1063;.0957,-1.4091,.4036;.1349,-1.0001,2.7969;-.8416,-5.1459,3.5491;-.3537,-2.8606,4.4159;1.2684,-1.7268,-3.9435;1.4337,-1.324,-3.0451;.3514,3.6997,-1.1152;-2.1518,-2.9683,-1.6916;-2.9231,-3.1551,-.5403;-3.1031,-2.2883,.4019;-3.8348,-.7284,.6768;-4.7756,-.2945,-.8739;-2.5231,.4785,1.1913;-5.0002,-1.0721,2.1002;-3.4016,-4.3686,-.3082;-4.1034,-4.6181,.9003;-4.1153,-.0454,-1.7197;-5.4042,.5949,-.6857;-5.4394,-1.1216,-1.1845;-1.6519,.5722,.5177;-2.1307,.2093,2.1874;-3.001,1.4722,1.2732;-5.4565,-.1287,2.4507;-5.8193,-1.7545,1.8134;-4.456,-1.5196,2.9509;-5.0418,-4.0406,.9307;-3.483,-4.3653,1.7741;-4.3292,-5.6928,.8913;4.2806,-2.1993,-.1794;4.1322,-3.2852,-1.0543;3.4844,-4.447,-.6512;2.9931,-4.5188,.647;3.1442,-3.4705,1.5502;3.7798,-2.3096,1.1273;4.4883,-3.2014,-2.0843;3.3367,-5.2778,-1.3416;2.2562,-5.7111,1.0654;2.7384,-3.5627,2.5587;3.8747,-1.4682,1.8159;-.4976,4.0256,-.0489;-1.865,3.7978,-.1265;-2.3812,3.2394,-1.291;-1.572,2.9386,-2.3835;-.2058,3.1695,-2.2883;-.0698,4.4159,.8776;-2.5275,4.022,.7101;-3.811,2.9267,-1.356;-2.0141,2.5138,-3.2855;.4414,2.911,-3.128;2.1651,-5.936,2.2507;1.7585,-6.4019,.195;-4.2702,2.5807,-2.4233;-4.458,3.0139,-.3293;6.6633,.1701,-1.969;5.9846,1.4164,-1.838;7.8613,.1033,-2.7326;8.3541,1.2146,-3.3703;8.3786,-.8578,-2.813;9.2736,1.1512,-3.9589;6.5037,2.5411,-2.5389;7.6561,2.443,-3.2811;5.9712,3.493,-2.49;8.0337,3.3209,-3.8129;4.5737,3.9069,-.2328;3.749,5.0574,-.0619;5.9116,3.9629,.2499;6.4135,5.1099,.8166;6.5443,3.0765,.1723;7.4443,5.1268,1.1814;4.3015,6.2345,.5147;5.6066,6.2666,.9392;3.6599,7.1142,.6258;6.0198,7.1755,1.3854;-2.3847,-3.9076,-2.8585;-2.555,-4.9469,-2.5403;-3.2691,-3.5831,-3.4378;-1.5215,-3.8899,-3.5427;-1.7226,-1.5767,-2.0719;-2.4665,-1.1019,-2.7376;-1.5527,-.9185,-1.2065;-.7781,-1.615,-2.6381;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662863880416</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.006504573227 0.000587992144 0.020872152895 0.005337851704</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056885985 -0.001695642 0.000194874 0.000322907 0.000362148 0.000384948 0.000446400 0.000507240 0.000605716 0.000686130 0.000806939 0.000896342 0.001066706 0.001134904 0.001283348 0.001321961 0.001380631 0.001523979 0.001794812 0.002006151 0.002293502 0.002429993 0.002591657 0.003133145 0.003378953 0.003751896 0.004112096 0.004349247 0.004628884 0.004693690 0.004978829 0.005200856 0.005894404 0.006019321 0.006664092 0.006793930 0.007040275 0.007291699 0.008104944 0.008333607 0.008774413 0.009187312 0.009681681 0.009983263 0.010919512 0.011136353 0.011309828 0.012024731 0.013177854 0.013380750 0.013843155 0.014552472 0.014861938 0.015447067 0.015723044 0.016393430 0.016485390 0.016845627 0.018322982 0.019153598 0.019829723 0.020260204 0.021023119 0.021580084 0.022097203 0.022685997 0.023343167 0.023595393 0.024467517 0.025824081 0.026330317 0.026573590 0.027004861 0.027178621 0.028042560 0.028753421 0.030673804 0.030927911 0.032645926 0.033246273 0.034330470 0.035711940 0.038828895 0.039170040 0.041821410 0.045353051 0.045493548 0.045797042 0.048502113 0.049420321 0.049706184 0.050140818 0.051526419 0.052007489 0.052051886 0.052283213 0.052382165 0.053334956 0.053742870 0.055385329 0.056284404 0.056529822 0.056614138 0.056967223 0.057576939 0.058330802 0.059162315 0.059575656 0.060765956 0.061928464 0.062385181 0.064143578 0.064205105 0.064825982 0.065553928 0.066821270 0.067683597 0.068832715 0.070117279 0.071777551 0.072091343 0.072496866 0.072889518 0.075286865 0.078183536 0.080572143 0.081356824 0.083138368 0.083308140 0.086450014 0.088527796 0.089294270 0.089766737 0.091264350 0.093206367 0.094480412 0.095427971 0.096073986 0.096788621 0.098071071 0.099979983 0.100348876 0.102434076 0.103252283 0.103795760 0.104848505 0.107911840 0.110263992 0.111384181 0.111898006 0.113137901 0.114214572 0.115471710 0.116123781 0.116751566 0.118099254 0.118472404 0.121769001 0.124422393 0.125402038 0.128337698 0.128705345 0.130221570 0.133361459 0.136005245 0.137322970 0.138330874 0.138558112 0.139808112 0.141672177 0.143459199 0.145552616 0.146159821 0.151629601 0.153217236 0.153335646 0.159939151 0.160830679 0.168375885 0.171299157 0.175592325 0.178721504 0.181266902 0.183827905 0.188599252 0.189092887 0.191204117 0.200600268 0.202091598 0.205938015 0.206843988 0.207205513 0.210554194 0.211861775 0.212513297 0.213437610 0.216496183 0.218242492 0.220553896 0.223985314 0.225399307 0.231793436 0.234092665 0.234654063 0.238310173 0.245127970 0.247257298 0.251071123 0.256433788 0.257049701 0.257375266 0.262252558 0.271518430 0.282670781 0.291731023 0.299570566 0.299893895 0.300884369 0.306990843 0.307725665 0.309605612 0.318604054 0.321190551 0.326264387 0.329178971 0.335262663 0.347585934 0.351843001 0.355571270 0.359499488 0.360548680 0.364042825 0.384158126 0.406692559 0.411800214 0.430134857 0.431788619 0.434417850 0.449074251 0.464376768 0.473571713 0.478578866 0.479477935 0.486443902 0.498829657 0.502653500 0.513929061 0.516318220 0.543672086 0.566802118 0.567548060 0.585945351 0.591801290 0.605628373 0.643459078 0.645194607 0.666751450 0.675514490 0.685639229 0.701055768 0.701269461 0.703241427 0.704284931 0.717071882 0.731475754 0.736911079 0.737981663 0.747185150 0.750741772 0.771602474 0.775954588 0.807979898 0.821452906 0.821657836 0.827993907 0.833881047 0.846593275 0.847327207 0.849891842 0.853946812 0.861007581 0.867441575 0.874993007 0.881173579 0.887264858 0.889670172 0.892424586 0.900807604 0.908569752 0.915485822 0.917642259 0.924391634 0.931687723 0.934843415 0.953886328 0.956761552 0.962098041 0.969608882 0.975223864 0.982212385 0.998512597 1.004352458 1.014552506 1.020307946 1.039802890 1.054985165 1.063671706 1.069243434 1.078471018 1.087092016 1.103266106 1.110244011 1.111582210 1.118067131 1.122497085 1.123501827 1.136536073 1.148225856 1.161652107 1.169954605 1.176515933 1.186577936 1.200637871 1.220632753 1.231104231 1.257592040 1.296277426 1.296454149 1.314631120 1.326338244 1.326697643 1.329866591 1.330953463 1.334642148 1.341446060 1.347765487 1.364037428 1.379492303 1.381092929 1.381557531 1.426398643 1.509732233 1.557873554 1.684398909 1.918173754</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">162</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92777446" y3="-0.95539528" z3="-0.67382554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.62464394" y3="-1.94819896" z3="-1.51669342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.1059488" y3="-0.99394842" z3="-1.38267797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.79046082" y3="1.47822834" z3="-1.04729495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2934915" y3="0.30921965" z3="-0.49680699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.67127323" y3="2.73498615" z3="-1.17492024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01443827" y3="2.73472754" z3="-0.84230621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37566143" y3="4.99188348" z3="-0.40660712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81668125" y3="3.8483538" z3="-0.92693057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74486027" y3="5.86725357" z3="-0.22318489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11893574" y3="1.60777387" z3="-1.71031469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12159281" y3="0.35173037" z3="0.20205021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72150058" y3="0.38148736" z3="-0.67758853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60372994" y3="0.73604634" z3="0.23267974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68172168" y3="-0.85925712" z3="-1.54170738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08677281" y3="-2.46598362" z3="-1.3471843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.92054161" y3="-5.48626917" z3="-6.31471473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.67290673" y3="-5.05031489" z3="-5.34262785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02001596" y3="-3.90624405" z3="-2.87465331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.64199508" y3="-3.66950778" z3="-5.19699916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.40723247" y3="-5.87536385" z3="-4.24700742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09490938" y3="-5.29723742" z3="-3.02289945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.32492841" y3="-3.06598513" z3="-3.96974051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.85680921" y3="-3.0034635" z3="-6.03631306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.45644196" y3="-6.96321668" z3="-4.33998977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.92393011" y3="-5.92887625" z3="-2.14714411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63614849" y3="-3.35626477" z3="-1.6246842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35604318" y3="-3.83526333" z3="-0.86596534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70297705" y3="-4.83853018" z3="-1.12744278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37149383" y3="-3.53003519" z3="0.58245008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37027202" y3="-3.0458719" z3="3.34070528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6614881" y3="-4.56362615" z3="1.48294978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10009903" y3="-2.24931235" z3="1.07490487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09661366" y3="-2.00968797" z3="2.44465114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65213839" y3="-4.32413812" z3="2.85611788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8557799" y3="-5.57199846" z3="1.10849919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09828885" y3="-1.41177658" z3="0.40816708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.13123697" y3="-1.00041241" z3="2.79724423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85012119" y3="-5.14500752" z3="3.54635748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.35830953" y3="-2.85990295" z3="4.41857279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.27695154" y3="-1.72998144" z3="-3.93960094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.43769303" y3="-1.32629462" z3="-3.04074735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34960144" y3="3.70146772" z3="-1.10697298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14933836" y3="-2.9694537" z3="-1.69364402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92213047" y3="-3.15489406" z3="-0.54264042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10314619" y3="-2.28714426" z3="0.39825666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83568585" y3="-0.72676814" z3="0.67005469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.76753027" y3="-0.29003036" z3="-0.88602217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52393822" y3="0.47693962" z3="1.19237633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.01004756" y3="-1.06989566" z3="2.08646844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40073074" y3="-4.3684509" z3="-0.30892703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10385376" y3="-4.61632598" z3="0.89916369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.1025134" y3="-0.03421219" z3="-1.72617183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.40073282" y3="0.59592904" z3="-0.69748674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.42652941" y3="-1.11805461" z3="-1.20534227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65138464" y3="0.57194273" z3="0.52088477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13427573" y3="0.20363916" z3="2.18844028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00066097" y3="1.47130849" z3="1.27616109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.4675602" y3="-0.12602303" z3="2.43455821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.82881399" y3="-1.7507319" z3="1.79395022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.47204493" y3="-1.51884406" z3="2.94065046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04258207" y3="-4.03898913" z3="0.92775192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48492452" y3="-4.36276077" z3="1.77347162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32984566" y3="-5.69079193" z3="0.89096639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28097452" y3="-2.19929818" z3="-0.18050397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1329843" y3="-3.28620444" z3="-1.05397942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48452277" y3="-4.44681223" z3="-0.64989406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99101857" y3="-4.5155884" z3="0.64758397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14318798" y3="-3.46741709" z3="1.54989755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78063364" y3="-2.30846428" z3="1.1264198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49017301" y3="-3.20443486" z3="-2.08381931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.33935012" y3="-5.28006981" z3="-1.33862075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25599954" y3="-5.70960723" z3="1.06859472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73818708" y3="-3.55925999" z3="2.5587653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87768469" y3="-1.46834548" z3="1.81507543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49770761" y3="4.0250096" z3="-0.03844578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86544377" y3="3.79881601" z3="-0.11505014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38330311" y3="3.24476388" z3="-1.2806478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57593928" y3="2.94663673" z3="-2.37575469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.20922981" y3="3.17509763" z3="-2.28088391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06815916" y3="4.41162823" z3="0.88917485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52696073" y3="4.02132597" z3="0.72258192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.81405945" y3="2.93537139" z3="-1.34641762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.01952217" y3="2.52538714" z3="-3.2786268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.43725765" y3="2.91728256" z3="-3.12084845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16761511" y3="-5.93454663" z3="2.25512977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76003917" y3="-6.40414344" z3="0.20030889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.27509571" y3="2.59619417" z3="-2.41507131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45962314" y3="3.01771135" z3="-0.31819822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65830489" y3="0.16983826" z3="-1.97744107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.98007712" y3="1.416221" z3="-1.84449049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.85392181" y3="0.1027612" z3="-2.74486739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.34481376" y3="1.21399112" z3="-3.38415457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.37072361" y3="-0.85840403" z3="-2.82679729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.26235858" y3="1.15030807" z3="-3.97566555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49718249" y3="2.54082336" z3="-2.54689737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.64728173" y3="2.44248764" z3="-3.292689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.96495935" y3="3.49280871" z3="-2.49629978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.02333953" y3="3.32031635" z3="-3.82570048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57401216" y3="3.90610094" z3="-0.23326383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.74982915" y3="5.05626488" z3="-0.05830658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91336364" y3="3.96143843" z3="0.24541903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4167098" y3="5.10756771" z3="0.81249081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54592409" y3="3.07530744" z3="0.1645474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.44867954" y3="5.12404105" z3="1.17427722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30377603" y3="6.23246971" z3="0.5186239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61005863" y3="6.26399859" z3="0.93940111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66239732" y3="7.11183888" z3="0.63307327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.02441778" y3="7.17217933" z3="1.38589405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.38025823" y3="-3.91011511" z3="-2.85984405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.55285865" y3="-4.94892646" z3="-2.53817908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.26269026" y3="-3.58591712" z3="-3.44331445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51515332" y3="-3.89671229" z3="-3.54147709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71897933" y3="-1.57869722" z3="-2.07508037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.46137857" y3="-1.10432214" z3="-2.74196749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.55128207" y3="-0.91828724" z3="-1.20959322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.77296464" y3="-1.61792767" z3="-2.63923118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9278,-.9554,-.6738;6.6246,-1.9482,-1.5167;6.1059,-.9939,-1.3827;4.7905,1.4782,-1.0473;4.2935,.3092,-.4968;2.6713,2.735,-1.1749;4.0144,2.7347,-.8423;2.3757,4.9919,-.4066;1.8167,3.8484,-.9269;1.7449,5.8673,-.2232;2.1189,1.6078,-1.7103;3.1216,.3517,.2021;1.7215,.3815,-.6776;.6037,.736,.2327;1.6817,-.8593,-1.5417;1.0868,-2.466,-1.3472;1.9205,-5.4863,-6.3147;1.6729,-5.0503,-5.3426;1.02,-3.9062,-2.8747;1.642,-3.6695,-5.197;1.4072,-5.8754,-4.247;1.0949,-5.2972,-3.0229;1.3249,-3.066,-3.9697;1.8568,-3.0035,-6.0363;1.4564,-6.9632,-4.34;.9239,-5.9289,-2.1471;.6361,-3.3563,-1.6247;-.356,-3.8353,-.866;-.703,-4.8385,-1.1274;-.3715,-3.53,.5825;-.3703,-3.0459,3.3407;-.6615,-4.5636,1.4829;-.1001,-2.2493,1.0749;-.0966,-2.0097,2.4447;-.6521,-4.3241,2.8561;-.8558,-5.572,1.1085;.0983,-1.4118,.4082;.1312,-1.0004,2.7972;-.8501,-5.145,3.5464;-.3583,-2.8599,4.4186;1.277,-1.73,-3.9396;1.4377,-1.3263,-3.0407;.3496,3.7015,-1.107;-2.1493,-2.9695,-1.6936;-2.9221,-3.1549,-.5426;-3.1031,-2.2871,.3983;-3.8357,-.7268,.6701;-4.7675,-.29,-.886;-2.5239,.4769,1.1924;-5.01,-1.0699,2.0865;-3.4007,-4.3685,-.3089;-4.1039,-4.6163,.8992;-4.1025,-.0342,-1.7262;-5.4007,.5959,-.6975;-5.4265,-1.1181,-1.2053;-1.6514,.5719,.5209;-2.1343,.2036,2.1884;-3.0007,1.4713,1.2762;-5.4676,-.126,2.4346;-5.8288,-1.7507,1.794;-4.472,-1.5188,2.9407;-5.0426,-4.039,.9278;-3.4849,-4.3628,1.7735;-4.3298,-5.6908,.891;4.281,-2.1993,-.1805;4.133,-3.2862,-1.054;3.4845,-4.4468,-.6499;2.991,-4.5156,.6476;3.1432,-3.4674,1.5499;3.7806,-2.3085,1.1264;4.4902,-3.2044,-2.0838;3.3394,-5.2801,-1.3386;2.256,-5.7096,1.0686;2.7382,-3.5593,2.5588;3.8777,-1.4683,1.8151;-.4977,4.025,-.0384;-1.8654,3.7988,-.1151;-2.3833,3.2448,-1.2806;-1.5759,2.9466,-2.3758;-.2092,3.1751,-2.2809;-.0682,4.4116,.8892;-2.527,4.0213,.7226;-3.8141,2.9354,-1.3464;-2.0195,2.5254,-3.2786;.4373,2.9173,-3.1208;2.1676,-5.9345,2.2551;1.76,-6.4041,.2003;-4.2751,2.5962,-2.4151;-4.4596,3.0177,-.3182;6.6583,.1698,-1.9774;5.9801,1.4162,-1.8445;7.8539,.1028,-2.7449;8.3448,1.214,-3.3842;8.3707,-.8584,-2.8268;9.2624,1.1503,-3.9757;6.4972,2.5408,-2.5469;7.6473,2.4425,-3.2927;5.965,3.4928,-2.4963;8.0233,3.3203,-3.8257;4.574,3.9061,-.2333;3.7498,5.0563,-.0583;5.9134,3.9614,.2454;6.4167,5.1076,.8125;6.5459,3.0753,.1645;7.4487,5.124,1.1743;4.3038,6.2325,.5186;5.6101,6.264,.9394;3.6624,7.1118,.6331;6.0244,7.1722,1.3859;-2.3803,-3.9101,-2.8598;-2.5529,-4.9489,-2.5382;-3.2627,-3.5859,-3.4433;-1.5152,-3.8967,-3.5415;-1.719,-1.5787,-2.0751;-2.4614,-1.1043,-2.742;-1.5513,-.9183,-1.2096;-.773,-1.6179,-2.6392;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662881965503</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.005369841818 0.000484157104 0.021648788693 0.005334793885</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056886881 -0.001138922 0.000196424 0.000330566 0.000367462 0.000385877 0.000453881 0.000506868 0.000606776 0.000686843 0.000806791 0.000897748 0.001067109 0.001135253 0.001283281 0.001321945 0.001381596 0.001524140 0.001795434 0.002008565 0.002297108 0.002438491 0.002593750 0.003133024 0.003378946 0.003753750 0.004114418 0.004350136 0.004629029 0.004697640 0.004979569 0.005200774 0.005894501 0.006019796 0.006664148 0.006795420 0.007040091 0.007293436 0.008104874 0.008333092 0.008779671 0.009186966 0.009682204 0.009983053 0.010920198 0.011136334 0.011313882 0.012025221 0.013177823 0.013381169 0.013843204 0.014553749 0.014862520 0.015448722 0.015728840 0.016393261 0.016495337 0.016845710 0.018372734 0.019157493 0.019834098 0.020260798 0.021023406 0.021582016 0.022097089 0.022686687 0.023343678 0.023596245 0.024471226 0.025824638 0.026331667 0.026573336 0.027005166 0.027185437 0.028042625 0.028756088 0.030712114 0.030928860 0.032645634 0.033261804 0.034332299 0.035716117 0.038842768 0.039175042 0.041830792 0.045353004 0.045498653 0.045821339 0.048506418 0.049426630 0.049714109 0.050142073 0.051526484 0.052007804 0.052072732 0.052283239 0.052382248 0.053335300 0.053791667 0.055396546 0.056284610 0.056529539 0.056615378 0.056967382 0.057577242 0.058332338 0.059163758 0.059581933 0.060766574 0.061932071 0.062404255 0.064157175 0.064213374 0.064826135 0.065580255 0.066823482 0.067687236 0.068832879 0.070125707 0.071777737 0.072092290 0.072505015 0.072890208 0.075286866 0.078202445 0.080592324 0.081360541 0.083145367 0.083322162 0.086450213 0.088527994 0.089295256 0.089768821 0.091267357 0.093206379 0.094484365 0.095428201 0.096074089 0.096788684 0.098071725 0.099982534 0.100357229 0.102434990 0.103253233 0.103799617 0.104860043 0.107932451 0.110328182 0.111594514 0.111906361 0.113153179 0.114250878 0.116006592 0.116350658 0.116756698 0.118467416 0.118515085 0.121769064 0.124422215 0.125404316 0.128337676 0.128733176 0.130275622 0.133390321 0.136010932 0.137344203 0.138332086 0.138559608 0.139813038 0.141673164 0.143459341 0.145552918 0.146160322 0.151629731 0.153215978 0.153338425 0.159944607 0.160831073 0.168385576 0.171301167 0.175593452 0.178724114 0.181269882 0.183827591 0.188601028 0.189101245 0.191205275 0.200600353 0.202093300 0.205957908 0.206848947 0.207205672 0.210554730 0.211862006 0.212514249 0.213438056 0.216496827 0.218242910 0.220553908 0.223985089 0.225399378 0.231794242 0.234150022 0.234659421 0.238313051 0.245153889 0.247256643 0.251107495 0.256438819 0.257101324 0.257480236 0.262252530 0.271518848 0.282671346 0.291742479 0.299573274 0.299895277 0.300891568 0.306996428 0.307725675 0.309606907 0.318613991 0.321208399 0.326266246 0.329182061 0.335264603 0.347588380 0.351891321 0.355571271 0.359504251 0.360549421 0.364044484 0.384172697 0.406697289 0.411800554 0.430134899 0.431795095 0.434417889 0.449086257 0.464378646 0.473571768 0.478593291 0.479555284 0.486457612 0.498837615 0.502656766 0.513931272 0.516319296 0.543675151 0.566824450 0.567566335 0.585992796 0.591805216 0.605628453 0.643459546 0.645205249 0.666891015 0.675515792 0.685664916 0.701075460 0.702234405 0.703284680 0.704287981 0.717077006 0.731486273 0.736919199 0.737981663 0.747186942 0.750741797 0.771602481 0.775954598 0.808009180 0.821653207 0.821763283 0.827996412 0.833884708 0.846602142 0.847343688 0.849929017 0.854027162 0.861222611 0.867441607 0.874996219 0.881173327 0.887274140 0.889696939 0.892424764 0.900811141 0.908571833 0.915501307 0.917645271 0.924391890 0.931687736 0.934855890 0.953977677 0.956793892 0.962104538 0.969609631 0.975223860 0.982232864 0.998520292 1.004356157 1.014627518 1.020425044 1.039890848 1.055009505 1.066031196 1.069246515 1.078578194 1.087127524 1.103267940 1.110246080 1.111583294 1.118124193 1.122497085 1.123501837 1.136906809 1.148228637 1.161652107 1.169956820 1.176518234 1.186579122 1.200644367 1.220634782 1.231114043 1.257666549 1.296278563 1.296461559 1.314631207 1.326338646 1.326697868 1.329866623 1.330955027 1.334643587 1.341449696 1.347766737 1.364100462 1.379492693 1.381092960 1.381557513 1.426402465 1.509747512 1.557873806 1.684531128 1.918173473</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">163</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92453588" y3="-0.95562024" z3="-0.67691001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61954352" y3="-1.94879739" z3="-1.52330951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10114577" y3="-0.99451545" z3="-1.38845711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78753942" y3="1.47813344" z3="-1.05005262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29125779" y3="0.30928278" z3="-0.49855066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66885913" y3="2.73612807" z3="-1.17189506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01281695" y3="2.73493662" z3="-0.84254053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37618409" y3="4.99219244" z3="-0.40014226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81550296" y3="3.84964046" z3="-0.92068847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74617169" y3="5.86755941" z3="-0.21405232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11444885" y3="1.60968208" z3="-1.70686875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12086157" y3="0.35226692" z3="0.20284604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71906673" y3="0.38262082" z3="-0.67424275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60298628" y3="0.73623299" z3="0.23847566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67768223" y3="-0.85757787" z3="-1.53908062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08789304" y3="-2.46566977" z3="-1.34567427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.93311013" y3="-5.48942412" z3="-6.30873828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.68296894" y3="-5.05301161" z3="-5.3375519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02445857" y3="-3.90782258" z3="-2.8716956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.65183351" y3="-3.67215891" z3="-5.19262721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.41445008" y3="-5.87755105" z3="-4.24222433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.09934805" y3="-5.29891926" z3="-3.01913089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33180921" y3="-3.06804174" z3="-3.96650124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.86884137" y3="-3.00649059" z3="-6.03162644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.46368721" y3="-6.96541121" z3="-4.33462865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9266111" y3="-5.93025578" z3="-2.14338122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.63881654" y3="-3.35702325" z3="-1.62272183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35297547" y3="-3.83737264" z3="-0.8635722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69966064" y3="-4.84054608" z3="-1.12537614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37037191" y3="-3.53120951" z3="0.58476281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37360466" y3="-3.0459155" z3="3.34147291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66458169" y3="-4.56296041" z3="1.48309388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.09788838" y3="-2.25207655" z3="1.07803191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.09641994" y3="-2.01144367" z3="2.44766646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65762154" y3="-4.32216958" z3="2.85587407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85487546" y3="-5.57450634" z3="1.10994652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09653071" y3="-1.41203642" z3="0.40822622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12873363" y3="-1.00041049" z3="2.79957846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.84879004" y3="-5.14644431" z3="3.55116086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3605472" y3="-2.86175397" z3="4.41980038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.28391665" y3="-1.73202093" z3="-3.93732738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44106526" y3="-1.32732118" z3="-3.03838463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34806272" y3="3.70384353" z3="-1.0984485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14694542" y3="-2.97258803" z3="-1.69465449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92118206" y3="-3.15601471" z3="-0.54486999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10419634" y3="-2.28595067" z3="0.39385646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83655072" y3="-0.7250266" z3="0.66207122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75922704" y3="-0.28474553" z3="-0.89747409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5259926" y3="0.47570173" z3="1.19265831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.01940007" y3="-1.06768344" z3="2.07055824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4004153" y3="-4.36873423" z3="-0.31025999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10348666" y3="-4.61495715" z3="0.89836719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.09000353" y3="-0.02219996" z3="-1.73166008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39787951" y3="0.59721212" z3="-0.70854638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.41168412" y3="-1.11410842" z3="-1.22467082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65112024" y3="0.57135528" z3="0.52394649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1396069" y3="0.19886949" z3="2.18882253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00181648" y3="1.4700596" z3="1.27836496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.47747816" y3="-0.12346013" z3="2.41655126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.83708253" y3="-1.7469434" z3="1.77230143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.48770834" y3="-1.51821442" z3="2.92727412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04220001" y3="-4.03762788" z3="0.92627401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48398131" y3="-4.3595539" z3="1.77228939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.32906593" y3="-5.68988921" z3="0.89230846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27890696" y3="-2.19928733" z3="-0.18144475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13265469" y3="-3.28836767" z3="-1.05279097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48676687" y3="-4.45004804" z3="-0.64614476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99457159" y3="-4.5184043" z3="0.65187397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14382257" y3="-3.46682168" z3="1.55176292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77821015" y3="-2.30634399" z3="1.1255985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48892151" y3="-3.20755162" z3="-2.0829751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34098007" y3="-5.28327584" z3="-1.33381627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2594005" y3="-5.71089209" z3="1.07417323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73788024" y3="-3.5563662" z3="2.56048633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87181512" y3="-1.46267842" z3="1.81179952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49760431" y3="4.02502742" z3="-0.02805274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86585653" y3="3.80114209" z3="-0.10421109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38593197" y3="3.25195504" z3="-1.27125773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.57977238" y3="2.95521393" z3="-2.36713004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21266385" y3="3.18131911" z3="-2.27311517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06674991" y3="4.4088048" z3="0.89972663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52602208" y3="4.02166576" z3="0.73525389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8171114" y3="2.94514535" z3="-1.33607819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.02496615" y3="2.53763273" z3="-3.27095016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.43247408" y3="2.92562482" z3="-3.11556446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17096303" y3="-5.93381859" z3="2.26028356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7611942" y3="-6.40429777" z3="0.20621167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28029697" y3="2.61367419" z3="-2.40615647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46110527" y3="3.02209963" z3="-0.30657462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.65235932" y3="0.169012" z3="-1.98492779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.97503568" y3="1.41568535" z3="-1.85031951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8458038" y3="0.10145899" z3="-2.75572461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.33528202" y3="1.21244258" z3="-3.39661347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.36199789" y3="-0.859894" z3="-2.8390495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.25105493" y3="1.14834269" z3="-3.99083289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.49067764" y3="2.54010767" z3="-2.55417017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.63858645" y3="2.44125886" z3="-3.30327089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95899386" y3="3.49231064" z3="-2.50204578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.01352746" y3="3.31888164" z3="-3.83747552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57456665" y3="3.9053965" z3="-0.23374992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7512899" y3="5.05555928" z3="-0.05509322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91532408" y3="3.95970398" z3="0.24127234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4207179" y3="5.10486271" z3="0.80848892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54738665" y3="3.07355647" z3="0.15743946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45378046" y3="5.12056711" z3="1.16732817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30727283" y3="6.23070807" z3="0.52206191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61477266" y3="6.26126772" z3="0.93932454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66650146" y3="7.11005424" z3="0.63950512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03074436" y3="7.16863832" z3="1.38598122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3762761" y3="-3.91541221" z3="-2.85940404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54735164" y3="-4.95398705" z3="-2.538087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25996319" y3="-3.59369754" z3="-3.44301155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.51093392" y3="-3.89966288" z3="-3.5408232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71587711" y3="-1.58223521" z3="-2.07741699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.45769245" y3="-1.1088465" z3="-2.74646734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5479978" y3="-0.9219296" z3="-1.2130777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76978062" y3="-1.62217637" z3="-2.64083065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9245,-.9556,-.6769;6.6195,-1.9488,-1.5233;6.1011,-.9945,-1.3885;4.7875,1.4781,-1.0501;4.2913,.3093,-.4986;2.6689,2.7361,-1.1719;4.0128,2.7349,-.8425;2.3762,4.9922,-.4001;1.8155,3.8496,-.9207;1.7462,5.8676,-.2141;2.1144,1.6097,-1.7069;3.1209,.3523,.2028;1.7191,.3826,-.6742;.603,.7362,.2385;1.6777,-.8576,-1.5391;1.0879,-2.4657,-1.3457;1.9331,-5.4894,-6.3087;1.683,-5.053,-5.3376;1.0245,-3.9078,-2.8717;1.6518,-3.6722,-5.1926;1.4145,-5.8776,-4.2422;1.0993,-5.2989,-3.0191;1.3318,-3.068,-3.9665;1.8688,-3.0065,-6.0316;1.4637,-6.9654,-4.3346;.9266,-5.9303,-2.1434;.6388,-3.357,-1.6227;-.353,-3.8374,-.8636;-.6997,-4.8405,-1.1254;-.3704,-3.5312,.5848;-.3736,-3.0459,3.3415;-.6646,-4.563,1.4831;-.0979,-2.2521,1.078;-.0964,-2.0114,2.4477;-.6576,-4.3222,2.8559;-.8549,-5.5745,1.1099;.0965,-1.412,.4082;.1287,-1.0004,2.7996;-.8488,-5.1464,3.5512;-.3605,-2.8618,4.4198;1.2839,-1.732,-3.9373;1.4411,-1.3273,-3.0384;.3481,3.7038,-1.0984;-2.1469,-2.9726,-1.6947;-2.9212,-3.156,-.5449;-3.1042,-2.286,.3939;-3.8366,-.725,.6621;-4.7592,-.2847,-.8975;-2.526,.4757,1.1927;-5.0194,-1.0677,2.0706;-3.4004,-4.3687,-.3103;-4.1035,-4.615,.8984;-4.09,-.0222,-1.7317;-5.3979,.5972,-.7085;-5.4117,-1.1141,-1.2247;-1.6511,.5714,.5239;-2.1396,.1989,2.1888;-3.0018,1.4701,1.2784;-5.4775,-.1235,2.4166;-5.8371,-1.7469,1.7723;-4.4877,-1.5182,2.9273;-5.0422,-4.0376,.9263;-3.484,-4.3596,1.7723;-4.3291,-5.6899,.8923;4.2789,-2.1993,-.1814;4.1327,-3.2884,-1.0528;3.4868,-4.45,-.6461;2.9946,-4.5184,.6519;3.1438,-3.4668,1.5518;3.7782,-2.3063,1.1256;4.4889,-3.2076,-2.083;3.341,-5.2833,-1.3338;2.2594,-5.7109,1.0742;2.7379,-3.5564,2.5605;3.8718,-1.4627,1.8118;-.4976,4.025,-.0281;-1.8659,3.8011,-.1042;-2.3859,3.252,-1.2713;-1.5798,2.9552,-2.3671;-.2127,3.1813,-2.2731;-.0667,4.4088,.8997;-2.526,4.0217,.7353;-3.8171,2.9451,-1.3361;-2.025,2.5376,-3.271;.4325,2.9256,-3.1156;2.171,-5.9338,2.2603;1.7612,-6.4043,.2062;-4.2803,2.6137,-2.4062;-4.4611,3.0221,-.3066;6.6524,.169,-1.9849;5.975,1.4157,-1.8503;7.8458,.1015,-2.7557;8.3353,1.2124,-3.3966;8.362,-.8599,-2.839;9.2511,1.1483,-3.9908;6.4907,2.5401,-2.5542;7.6386,2.4413,-3.3033;5.959,3.4923,-2.502;8.0135,3.3189,-3.8375;4.5746,3.9054,-.2337;3.7513,5.0556,-.0551;5.9153,3.9597,.2413;6.4207,5.1049,.8085;6.5474,3.0736,.1574;7.4538,5.1206,1.1673;4.3073,6.2307,.5221;5.6148,6.2613,.9393;3.6665,7.1101,.6395;6.0307,7.1686,1.386;-2.3763,-3.9154,-2.8594;-2.5474,-4.954,-2.5381;-3.26,-3.5937,-3.443;-1.5109,-3.8997,-3.5408;-1.7159,-1.5822,-2.0774;-2.4577,-1.1088,-2.7465;-1.548,-.9219,-1.2131;-.7698,-1.6222,-2.6408;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662896996702</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.004258264462 0.000383649119 0.020732996355 0.005336061504</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887012 -0.000729690 0.000196176 0.000333244 0.000367525 0.000386984 0.000458443 0.000511991 0.000607874 0.000687899 0.000807183 0.000898195 0.001067237 0.001135267 0.001283243 0.001322073 0.001381986 0.001524209 0.001795988 0.002010033 0.002298549 0.002448337 0.002599162 0.003134363 0.003379013 0.003756375 0.004121824 0.004351164 0.004629046 0.004706483 0.004985245 0.005200705 0.005895895 0.006022562 0.006664463 0.006794889 0.007040736 0.007293892 0.008104816 0.008332824 0.008798737 0.009186884 0.009682396 0.009986616 0.010921414 0.011141963 0.011318662 0.012026192 0.013178411 0.013381270 0.013843365 0.014553758 0.014864213 0.015448720 0.015734108 0.016394164 0.016504825 0.016845920 0.018399538 0.019158972 0.019838800 0.020260966 0.021023687 0.021582932 0.022097063 0.022687386 0.023344979 0.023595800 0.024473302 0.025825081 0.026332626 0.026573361 0.027005235 0.027189472 0.028042889 0.028762313 0.030737830 0.030930709 0.032645705 0.033262820 0.034335912 0.035717434 0.038849923 0.039180462 0.041836145 0.045352991 0.045500244 0.045840524 0.048510696 0.049432368 0.049717348 0.050143568 0.051526610 0.052007972 0.052097559 0.052283259 0.052382403 0.053335485 0.053799191 0.055401856 0.056284368 0.056528903 0.056616458 0.056967383 0.057577197 0.058333874 0.059168467 0.059581388 0.060767252 0.061938357 0.062409802 0.064163156 0.064226574 0.064826147 0.065595896 0.066823701 0.067689831 0.068833744 0.070126142 0.071777907 0.072093840 0.072508714 0.072890216 0.075286745 0.078211047 0.080601797 0.081360716 0.083147668 0.083332078 0.086450119 0.088528288 0.089295441 0.089768849 0.091267185 0.093206435 0.094485731 0.095428388 0.096074186 0.096788634 0.098072392 0.099986844 0.100363541 0.102436860 0.103253204 0.103804513 0.104876385 0.107942362 0.110361977 0.111707586 0.111913100 0.113154665 0.114267511 0.116065204 0.116667742 0.116768426 0.118471334 0.118931370 0.121769083 0.124422786 0.125406971 0.128337728 0.128751122 0.130296459 0.133404237 0.136012929 0.137363071 0.138332409 0.138559934 0.139817947 0.141673189 0.143459499 0.145553119 0.146164027 0.151629785 0.153214571 0.153338880 0.159949614 0.160832779 0.168389562 0.171302118 0.175594190 0.178727088 0.181271417 0.183828185 0.188600975 0.189115067 0.191205277 0.200601641 0.202095499 0.205968715 0.206856257 0.207205698 0.210556487 0.211862013 0.212516442 0.213438418 0.216497289 0.218243437 0.220554794 0.223987052 0.225399384 0.231795200 0.234178335 0.234661982 0.238316435 0.245171397 0.247256343 0.251121537 0.256441115 0.257124917 0.257589982 0.262252511 0.271518935 0.282671551 0.291750352 0.299573865 0.299897165 0.300898417 0.307001420 0.307725679 0.309607948 0.318614449 0.321220427 0.326267815 0.329182846 0.335265541 0.347591285 0.351923052 0.355571512 0.359515643 0.360550833 0.364045544 0.384181302 0.406703571 0.411800591 0.430135399 0.431806614 0.434426338 0.449088128 0.464380502 0.473572095 0.478616080 0.479595759 0.486460624 0.498841595 0.502656588 0.513935212 0.516319184 0.543678064 0.566839055 0.567575307 0.586013432 0.591805292 0.605628422 0.643466990 0.645210988 0.666996465 0.675517376 0.685689756 0.701075615 0.702565084 0.703310650 0.704288867 0.717080195 0.731498173 0.736927412 0.737981674 0.747187517 0.750741814 0.771602485 0.775954600 0.808013233 0.821655082 0.821966722 0.827996743 0.833886263 0.846622852 0.847372474 0.849934668 0.854102552 0.861406343 0.867443407 0.874998191 0.881173196 0.887287642 0.889719986 0.892424976 0.900814777 0.908588933 0.915509100 0.917647351 0.924392102 0.931687736 0.934871235 0.954073173 0.956818028 0.962119949 0.969610259 0.975224408 0.982249694 0.998526645 1.004365382 1.014667626 1.020487557 1.039948243 1.055018817 1.067606456 1.069259415 1.078625327 1.087172500 1.103269563 1.110248589 1.111584329 1.118168635 1.122497088 1.123502030 1.137203651 1.148236368 1.161652106 1.169959157 1.176521885 1.186594113 1.200653060 1.220639818 1.231128350 1.257720910 1.296280759 1.296479802 1.314632240 1.326338587 1.326698661 1.329866679 1.330958283 1.334645563 1.341451300 1.347769729 1.364135664 1.379495928 1.381093583 1.381557634 1.426409481 1.509745904 1.557874231 1.684595640 1.918176293</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">164</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92264883" y3="-0.95561951" z3="-0.67908403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61527489" y3="-1.94925191" z3="-1.52963638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09726498" y3="-0.99488139" z3="-1.39391072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78479036" y3="1.47789733" z3="-1.0531794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28968862" y3="0.30939116" z3="-0.50003313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66629532" y3="2.73688285" z3="-1.16905271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01111976" y3="2.73497973" z3="-0.84337135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37626732" y3="4.99225429" z3="-0.39378905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81394523" y3="3.85048841" z3="-0.91438812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74696319" y3="5.8676088" z3="-0.20496264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.11012147" y3="1.61098227" z3="-1.70339002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12082724" y3="0.35315759" z3="0.20379338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7172728" y3="0.38347031" z3="-0.6703268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60296837" y3="0.73665933" z3="0.24466819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67439596" y3="-0.85659438" z3="-1.53521075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0893053" y3="-2.46731388" z3="-1.34174731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.94517043" y3="-5.49228122" z3="-6.30286999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.69310896" y3="-5.05560311" z3="-5.33222757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.02948089" y3="-3.90954508" z3="-2.86788708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.66165882" y3="-3.67473815" z3="-5.18775364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.42235314" y3="-5.87983461" z3="-4.23713425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1048215" y3="-5.30073224" z3="-3.01483957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.33908241" y3="-3.07012486" z3="-3.96237477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.88033914" y3="-3.00933914" z3="-6.02660726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.47174901" y3="-6.96774604" z3="-4.32909502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93040504" y3="-5.93182126" z3="-2.13923428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64132784" y3="-3.35880388" z3="-1.61955812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35194429" y3="-3.83845795" z3="-0.8630137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6977855" y3="-4.84178873" z3="-1.12540592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.371505" y3="-3.53306136" z3="0.58524523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37634301" y3="-3.0492626" z3="3.3428951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66318541" y3="-4.56712105" z3="1.48446676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1009314" y3="-2.25283332" z3="1.07870066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10037216" y3="-2.01329271" z3="2.44841615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65695784" y3="-4.32766394" z3="2.8575392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85593751" y3="-5.57570099" z3="1.10939898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09635632" y3="-1.41397084" z3="0.41103536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12727167" y3="-1.005043" z3="2.80226798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85386536" y3="-5.1496623" z3="3.54873082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.36587904" y3="-2.86411339" z3="4.4208963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.29141293" y3="-1.73415214" z3="-3.9341305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44391818" y3="-1.32849464" z3="-3.03466573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34610232" y3="3.70613777" z3="-1.09023037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14488071" y3="-2.97417095" z3="-1.69697223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91997599" y3="-3.156405" z3="-0.54718199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10356807" y3="-2.28562503" z3="0.39047311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83607625" y3="-0.72400147" z3="0.65551934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74968797" y3="-0.28039016" z3="-0.90946579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52636946" y3="0.47404096" z3="1.19470177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.02917399" y3="-1.06560068" z3="2.056922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39870134" y3="-4.3695481" z3="-0.31071552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10388997" y3="-4.61392016" z3="0.89663736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.07512651" y3="-0.01249238" z3="-1.73825539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.39194515" y3="0.59935306" z3="-0.72166587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.39853469" y3="-1.10987772" z3="-1.24540382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64994169" y3="0.57178659" z3="0.5287903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14315602" y3="0.19339362" z3="2.19151337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00215821" y3="1.46857443" z3="1.28236277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.48806724" y3="-0.12067132" z3="2.40020254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.84617321" y3="-1.7434358" z3="1.75300587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.50362069" y3="-1.51733952" z3="2.91730483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04198125" y3="-4.03566293" z3="0.9226775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48611369" y3="-4.3590681" z3="1.77125264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33067952" y3="-5.68813345" z3="0.89042041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27856572" y3="-2.19912351" z3="-0.1811477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13217624" y3="-3.28940787" z3="-1.05073416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48663663" y3="-4.45015841" z3="-0.64214215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99384989" y3="-4.51562179" z3="0.6557378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14469523" y3="-3.46419872" z3="1.55440509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77965195" y3="-2.30533132" z3="1.12664738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48809396" y3="-3.21047388" z3="-2.08122897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34283801" y3="-5.28601874" z3="-1.32795371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25994017" y3="-5.70853081" z3="1.0804178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74020963" y3="-3.55310848" z3="2.56374393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87571518" y3="-1.46306541" z3="1.81268198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49793016" y3="4.02569042" z3="-0.01811584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86645919" y3="3.80338451" z3="-0.09301316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.38845724" y3="3.25828646" z3="-1.26096519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58416517" y3="2.96386872" z3="-2.35933872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.21650393" y3="3.18721195" z3="-2.26566565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06535314" y3="4.40611552" z3="0.91057878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52557093" y3="4.02261443" z3="0.74744999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82048331" y3="2.95484229" z3="-1.32613258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.03098972" y3="2.54962095" z3="-3.2638626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.42809985" y3="2.93128073" z3="-3.10757732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1726449" y3="-5.92999158" z3="2.2673439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76314235" y3="-6.40509828" z3="0.21418952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.28586432" y3="2.6310513" z3="-2.39765804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4627608" y3="3.02658517" z3="-0.29507597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64681524" y3="0.16820915" z3="-1.99261705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.97009666" y3="1.41502921" z3="-1.8565131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8379585" y3="0.1001511" z3="-2.76688921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.32571691" y3="1.21083318" z3="-3.40953153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.35371173" y3="-0.86133638" z3="-2.85147033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.23967571" y3="1.14633588" z3="-4.00647403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.48396139" y3="2.53920669" z3="-2.56194488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62963209" y3="2.43988431" z3="-3.31436282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.95266219" y3="3.49156787" z3="-2.50827538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="8.00322644" y3="3.31728786" z3="-3.84980876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57492788" y3="3.90476315" z3="-0.23515529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75235459" y3="5.05492172" z3="-0.05262405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91711503" y3="3.9583513" z3="0.23577214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42434712" y3="5.1028286" z3="0.802709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54884661" y3="3.07220605" z3="0.14901326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.45846444" y3="5.11798439" z3="1.15837106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31020302" y3="6.229339" z3="0.52420042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.61894078" y3="6.25923122" z3="0.93745986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66993112" y3="7.10870781" z3="0.64471986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03633752" y3="7.16604271" z3="1.3839106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.37296924" y3="-3.91811238" z3="-2.86103755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54817172" y3="-4.95545996" z3="-2.5370728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2524113" y3="-3.59401554" z3="-3.44789794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50570663" y3="-3.90773288" z3="-3.54010784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.71311526" y3="-1.58460608" z3="-2.08071838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4538635" y3="-1.1118299" z3="-2.75057905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5470678" y3="-0.92229966" z3="-1.21634851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76585817" y3="-1.62511167" z3="-2.64241851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9226,-.9556,-.6791;6.6153,-1.9493,-1.5296;6.0973,-.9949,-1.3939;4.7848,1.4779,-1.0532;4.2897,.3094,-.5;2.6663,2.7369,-1.1691;4.0111,2.735,-.8434;2.3763,4.9923,-.3938;1.8139,3.8505,-.9144;1.747,5.8676,-.205;2.1101,1.611,-1.7034;3.1208,.3532,.2038;1.7173,.3835,-.6703;.603,.7367,.2447;1.6744,-.8566,-1.5352;1.0893,-2.4673,-1.3417;1.9452,-5.4923,-6.3029;1.6931,-5.0556,-5.3322;1.0295,-3.9095,-2.8679;1.6617,-3.6747,-5.1878;1.4224,-5.8798,-4.2371;1.1048,-5.3007,-3.0148;1.3391,-3.0701,-3.9624;1.8803,-3.0093,-6.0266;1.4717,-6.9677,-4.3291;.9304,-5.9318,-2.1392;.6413,-3.3588,-1.6196;-.3519,-3.8385,-.863;-.6978,-4.8418,-1.1254;-.3715,-3.5331,.5852;-.3763,-3.0493,3.3429;-.6632,-4.5671,1.4845;-.1009,-2.2528,1.0787;-.1004,-2.0133,2.4484;-.657,-4.3277,2.8575;-.8559,-5.5757,1.1094;.0964,-1.414,.411;.1273,-1.005,2.8023;-.8539,-5.1497,3.5487;-.3659,-2.8641,4.4209;1.2914,-1.7342,-3.9341;1.4439,-1.3285,-3.0347;.3461,3.7061,-1.0902;-2.1449,-2.9742,-1.697;-2.92,-3.1564,-.5472;-3.1036,-2.2856,.3905;-3.8361,-.724,.6555;-4.7497,-.2804,-.9095;-2.5264,.474,1.1947;-5.0292,-1.0656,2.0569;-3.3987,-4.3695,-.3107;-4.1039,-4.6139,.8966;-4.0751,-.0125,-1.7383;-5.3919,.5994,-.7217;-5.3985,-1.1099,-1.2454;-1.6499,.5718,.5288;-2.1432,.1934,2.1915;-3.0022,1.4686,1.2824;-5.4881,-.1207,2.4002;-5.8462,-1.7434,1.753;-4.5036,-1.5173,2.9173;-5.042,-4.0357,.9227;-3.4861,-4.3591,1.7713;-4.3307,-5.6881,.8904;4.2786,-2.1991,-.1811;4.1322,-3.2894,-1.0507;3.4866,-4.4502,-.6421;2.9938,-4.5156,.6557;3.1447,-3.4642,1.5544;3.7797,-2.3053,1.1266;4.4881,-3.2105,-2.0812;3.3428,-5.286,-1.328;2.2599,-5.7085,1.0804;2.7402,-3.5531,2.5637;3.8757,-1.4631,1.8127;-.4979,4.0257,-.0181;-1.8665,3.8034,-.093;-2.3885,3.2583,-1.261;-1.5842,2.9639,-2.3593;-.2165,3.1872,-2.2657;-.0654,4.4061,.9106;-2.5256,4.0226,.7474;-3.8205,2.9548,-1.3261;-2.031,2.5496,-3.2639;.4281,2.9313,-3.1076;2.1726,-5.93,2.2673;1.7631,-6.4051,.2142;-4.2859,2.6311,-2.3977;-4.4628,3.0266,-.2951;6.6468,.1682,-1.9926;5.9701,1.415,-1.8565;7.838,.1002,-2.7669;8.3257,1.2108,-3.4095;8.3537,-.8613,-2.8515;9.2397,1.1463,-4.0065;6.484,2.5392,-2.5619;7.6296,2.4399,-3.3144;5.9527,3.4916,-2.5083;8.0032,3.3173,-3.8498;4.5749,3.9048,-.2352;3.7524,5.0549,-.0526;5.9171,3.9584,.2358;6.4243,5.1028,.8027;6.5488,3.0722,.149;7.4585,5.118,1.1584;4.3102,6.2293,.5242;5.6189,6.2592,.9375;3.6699,7.1087,.6447;6.0363,7.166,1.3839;-2.373,-3.9181,-2.861;-2.5482,-4.9555,-2.5371;-3.2524,-3.594,-3.4479;-1.5057,-3.9077,-3.5401;-1.7131,-1.5846,-2.0807;-2.4539,-1.1118,-2.7506;-1.5471,-.9223,-1.2163;-.7659,-1.6251,-2.6424;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662907104686</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003097312431 0.000317596426 0.020949316949 0.005337009662</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887322 -0.000508908 0.000195876 0.000333824 0.000367581 0.000386999 0.000458916 0.000511841 0.000607842 0.000687781 0.000808776 0.000898695 0.001067215 0.001135292 0.001283357 0.001322327 0.001382279 0.001524278 0.001796777 0.002009905 0.002299802 0.002457745 0.002607625 0.003137332 0.003379568 0.003759594 0.004129552 0.004353105 0.004629062 0.004712541 0.004993065 0.005200635 0.005896752 0.006024907 0.006664505 0.006795000 0.007042528 0.007293814 0.008104759 0.008332698 0.008807203 0.009187113 0.009682384 0.009993551 0.010923229 0.011152924 0.011322483 0.012028297 0.013179790 0.013381365 0.013843402 0.014553676 0.014867216 0.015448736 0.015737621 0.016402237 0.016514610 0.016846699 0.018414678 0.019159164 0.019842687 0.020260944 0.021024280 0.021585060 0.022097139 0.022688282 0.023346310 0.023595603 0.024474307 0.025825477 0.026334908 0.026574012 0.027005724 0.027193146 0.028045233 0.028771968 0.030752237 0.030948180 0.032646633 0.033264103 0.034339479 0.035717861 0.038854304 0.039183240 0.041840078 0.045352950 0.045501727 0.045862474 0.048513990 0.049436228 0.049718580 0.050146232 0.051526719 0.052008073 0.052129466 0.052283280 0.052382443 0.053335426 0.053798786 0.055404244 0.056284427 0.056528803 0.056617216 0.056967378 0.057577289 0.058334632 0.059172076 0.059581755 0.060768557 0.061945008 0.062409453 0.064165498 0.064237743 0.064826133 0.065602095 0.066823767 0.067692712 0.068834785 0.070127110 0.071777843 0.072095364 0.072511011 0.072890093 0.075286593 0.078214169 0.080602863 0.081360926 0.083148627 0.083339904 0.086449803 0.088530457 0.089295440 0.089768905 0.091267052 0.093206599 0.094485677 0.095428397 0.096074646 0.096788608 0.098072701 0.099987935 0.100368017 0.102437806 0.103253375 0.103812115 0.104912413 0.107951278 0.110380481 0.111769820 0.111919775 0.113154712 0.114276639 0.116079373 0.116745598 0.116872789 0.118471465 0.119234907 0.121769136 0.124424083 0.125408542 0.128337720 0.128760561 0.130301104 0.133410559 0.136013178 0.137379792 0.138333156 0.138560320 0.139819348 0.141673197 0.143459660 0.145553927 0.146170876 0.151631217 0.153213702 0.153339093 0.159952128 0.160835454 0.168390539 0.171302317 0.175604897 0.178729549 0.181272379 0.183830814 0.188603932 0.189135068 0.191205669 0.200607915 0.202098581 0.205975729 0.206864245 0.207206228 0.210566095 0.211864419 0.212521356 0.213438853 0.216498417 0.218243343 0.220556206 0.223995234 0.225399387 0.231796353 0.234194552 0.234663462 0.238319446 0.245210408 0.247256403 0.251124384 0.256443610 0.257134759 0.257682764 0.262252488 0.271518961 0.282671946 0.291755187 0.299574392 0.299899001 0.300903972 0.307005163 0.307725682 0.309608376 0.318615977 0.321227214 0.326269070 0.329182724 0.335265542 0.347593212 0.351940147 0.355571903 0.359538958 0.360555348 0.364045808 0.384186451 0.406706266 0.411800764 0.430135995 0.431836422 0.434449606 0.449088099 0.464381767 0.473572467 0.478638500 0.479608689 0.486463724 0.498843079 0.502656576 0.513936350 0.516319615 0.543678340 0.566847486 0.567578735 0.586023921 0.591809723 0.605628565 0.643496912 0.645214022 0.667074542 0.675517368 0.685716611 0.701078955 0.702614109 0.703309924 0.704288857 0.717081906 0.731520755 0.736927971 0.737981740 0.747187516 0.750741820 0.771602497 0.775954619 0.808013249 0.821655167 0.822102926 0.827998180 0.833886713 0.846659246 0.847398794 0.849934876 0.854173063 0.861544717 0.867446754 0.874999405 0.881172998 0.887302762 0.889729938 0.892426857 0.900816979 0.908624895 0.915520566 0.917650847 0.924392190 0.931687774 0.934887747 0.954189100 0.956825163 0.962147799 0.969611922 0.975224035 0.982257884 0.998531206 1.004381457 1.014684849 1.020516382 1.039980474 1.055022708 1.068484214 1.069305748 1.078639907 1.087212606 1.103269781 1.110250617 1.111586464 1.118209645 1.122497111 1.123502264 1.137420624 1.148245956 1.161652201 1.169960847 1.176526872 1.186617656 1.200660359 1.220653257 1.231145417 1.257736440 1.296286827 1.296506698 1.314632889 1.326338535 1.326698850 1.329866613 1.330958585 1.334646793 1.341451283 1.347781336 1.364139479 1.379502585 1.381095240 1.381558104 1.426410008 1.509760245 1.557874565 1.684613740 1.918176617</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">165</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92035803" y3="-0.95586072" z3="-0.68097774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61099379" y3="-1.94983166" z3="-1.53524025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09318929" y3="-0.99546448" z3="-1.39876644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78200584" y3="1.47763514" z3="-1.05546402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28800018" y3="0.30931475" z3="-0.50093362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66379657" y3="2.73760689" z3="-1.16557732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00940723" y3="2.7349709" z3="-0.84330833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37685591" y3="4.99262205" z3="-0.38862261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81282299" y3="3.85149609" z3="-0.90856639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74845235" y3="5.86808795" z3="-0.19802978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10563692" y3="1.61229086" z3="-1.6990941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12066159" y3="0.35342156" z3="0.2054139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71546146" y3="0.38372878" z3="-0.66619757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60272319" y3="0.73545162" z3="0.25126722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67165915" y3="-0.8557613" z3="-1.53190991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09002304" y3="-2.4671358" z3="-1.34000386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.95897089" y3="-5.49394573" z3="-6.29722153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70422513" y3="-5.05710136" z3="-5.3274155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03411064" y3="-3.91074274" z3="-2.86520224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67154628" y3="-3.6761824" z3="-5.18346216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43123022" y3="-5.88117257" z3="-4.23283815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11036633" y3="-5.30192356" z3="-3.01156314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3457116" y3="-3.07141462" z3="-3.95912148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.89184194" y3="-3.01088436" z3="-6.02190424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48157136" y3="-6.96909384" z3="-4.32431588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93428684" y3="-5.93289311" z3="-2.13624356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64366647" y3="-3.35957398" z3="-1.61791778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34964917" y3="-3.84087617" z3="-0.86161558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69492819" y3="-4.84420499" z3="-1.12468526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37151553" y3="-3.53530298" z3="0.58662185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37984827" y3="-3.05292786" z3="3.34416816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66705665" y3="-4.56802166" z3="1.48372799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10094818" y3="-2.25619586" z3="1.08143849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10221116" y3="-2.01700838" z3="2.45135907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6622913" y3="-4.32888444" z3="2.85682911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85655952" y3="-5.57914991" z3="1.10922224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09670916" y3="-1.41661565" z3="0.41392966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12069955" y3="-1.00492265" z3="2.80396839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85598624" y3="-5.15320768" z3="3.5497915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.36945049" y3="-2.86938367" z3="4.422563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.29720002" y3="-1.73545219" z3="-3.93123737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44719089" y3="-1.32940764" z3="-3.03177517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34461591" y3="3.70831822" z3="-1.08187684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14247561" y3="-2.97710027" z3="-1.69868936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91947587" y3="-3.15684895" z3="-0.55025806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10476018" y3="-2.28362023" z3="0.38517693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83692153" y3="-0.72187877" z3="0.64835071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74165894" y3="-0.27376472" z3="-0.91994834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52745223" y3="0.47225094" z3="1.19580976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03751522" y3="-1.06410258" z3="2.04183031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39985633" y3="-4.36856008" z3="-0.31328184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10450548" y3="-4.61159841" z3="0.89532337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0632912" y3="0.00004737" z3="-1.74313774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38870888" y3="0.60208681" z3="-0.73120785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38471812" y3="-1.10423272" z3="-1.2632882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64856353" y3="0.57098155" z3="0.53249972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14713762" y3="0.18696242" z3="2.19179984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00168566" y3="1.46691152" z3="1.28596364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49738781" y3="-0.11913014" z3="2.38340903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85367036" y3="-1.74045259" z3="1.73205655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.51795432" y3="-1.51739161" z3="2.90470836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04276145" y3="-4.03334374" z3="0.9209795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4855311" y3="-4.35501075" z3="1.76941008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33130941" y3="-5.68635864" z3="0.89137577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2775576" y3="-2.19904281" z3="-0.18069457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13206621" y3="-3.29113517" z3="-1.04837124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48804194" y3="-4.45216096" z3="-0.6375094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99606225" y3="-4.51652264" z3="0.66073011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14534137" y3="-3.46236772" z3="1.55741945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77870363" y3="-2.3030418" z3="1.12739809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48725189" y3="-3.21346551" z3="-2.07919634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34358698" y3="-5.28807234" z3="-1.32227807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2623374" y3="-5.70868917" z3="1.087099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74068709" y3="-3.54942032" z3="2.56686826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87278832" y3="-1.45793665" z3="1.81148819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49750589" y3="4.02595548" z3="-0.00761204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86656409" y3="3.80607098" z3="-0.08176746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39093421" y3="3.26539754" z3="-1.25085616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.58815428" y3="2.97186786" z3="-2.35008924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22006836" y3="3.19269995" z3="-2.25760583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06328851" y3="4.4038561" z3="0.92107122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52426163" y3="4.02384268" z3="0.76029584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.823525" y3="2.964948" z3="-1.31502203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.03672434" y3="2.56097508" z3="-3.25530207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.42286552" y3="2.93879924" z3="-3.10247589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.174896" y3="-5.92828" z3="2.27412766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76506303" y3="-6.40581628" z3="0.22160205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29142426" y3="2.6490974" z3="-2.38780184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46384818" y3="3.03111989" z3="-0.28234503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64113296" y3="0.16728167" z3="-1.99965647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96504832" y3="1.41429165" z3="-1.8621111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82993347" y3="0.09866242" z3="-2.77750293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31594691" y3="1.20896955" z3="-3.42214034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34521912" y3="-0.86297124" z3="-2.86326671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22804569" y3="1.1440117" z3="-4.02189075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47706987" y3="2.53810543" z3="-2.56947487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62043496" y3="2.4382135" z3="-3.32535392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94609653" y3="3.49057067" z3="-2.5146004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.99262308" y3="3.31529436" z3="-3.86231969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57531222" y3="3.90418994" z3="-0.23604341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75375283" y3="5.05449113" z3="-0.05072232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91883064" y3="3.95702262" z3="0.2311365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42813558" y3="5.10097585" z3="0.79721767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54995754" y3="3.07075075" z3="0.14224761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46331938" y3="5.11554784" z3="1.14983632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31363989" y3="6.22829854" z3="0.52531368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62356157" y3="6.25749694" z3="0.93487177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67404206" y3="7.10774532" z3="0.64809985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04257745" y3="7.1638708" z3="1.38065041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36893881" y3="-3.92320685" z3="-2.86136624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54178765" y3="-4.96084725" z3="-2.53689882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.25090584" y3="-3.6030342" z3="-3.44922134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.50140254" y3="-3.9104954" z3="-3.54002556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70948192" y3="-1.58806116" z3="-2.08406697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44935205" y3="-1.11570334" z3="-2.75590339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54301731" y3="-0.9258089" z3="-1.22075141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76228636" y3="-1.62992188" z3="-2.645364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9204,-.9559,-.681;6.611,-1.9498,-1.5352;6.0932,-.9955,-1.3988;4.782,1.4776,-1.0555;4.288,.3093,-.5009;2.6638,2.7376,-1.1656;4.0094,2.735,-.8433;2.3769,4.9926,-.3886;1.8128,3.8515,-.9086;1.7485,5.8681,-.198;2.1056,1.6123,-1.6991;3.1207,.3534,.2054;1.7155,.3837,-.6662;.6027,.7355,.2513;1.6717,-.8558,-1.5319;1.09,-2.4671,-1.34;1.959,-5.4939,-6.2972;1.7042,-5.0571,-5.3274;1.0341,-3.9107,-2.8652;1.6715,-3.6762,-5.1835;1.4312,-5.8812,-4.2328;1.1104,-5.3019,-3.0116;1.3457,-3.0714,-3.9591;1.8918,-3.0109,-6.0219;1.4816,-6.9691,-4.3243;.9343,-5.9329,-2.1362;.6437,-3.3596,-1.6179;-.3496,-3.8409,-.8616;-.6949,-4.8442,-1.1247;-.3715,-3.5353,.5866;-.3798,-3.0529,3.3442;-.6671,-4.568,1.4837;-.1009,-2.2562,1.0814;-.1022,-2.017,2.4514;-.6623,-4.3289,2.8568;-.8566,-5.5791,1.1092;.0967,-1.4166,.4139;.1207,-1.0049,2.804;-.856,-5.1532,3.5498;-.3695,-2.8694,4.4226;1.2972,-1.7355,-3.9312;1.4472,-1.3294,-3.0318;.3446,3.7083,-1.0819;-2.1425,-2.9771,-1.6987;-2.9195,-3.1568,-.5503;-3.1048,-2.2836,.3852;-3.8369,-.7219,.6484;-4.7417,-.2738,-.9199;-2.5275,.4723,1.1958;-5.0375,-1.0641,2.0418;-3.3999,-4.3686,-.3133;-4.1045,-4.6116,.8953;-4.0633,0,-1.7431;-5.3887,.6021,-.7312;-5.3847,-1.1042,-1.2633;-1.6486,.571,.5325;-2.1471,.187,2.1918;-3.0017,1.4669,1.286;-5.4974,-.1191,2.3834;-5.8537,-1.7405,1.7321;-4.518,-1.5174,2.9047;-5.0428,-4.0333,.921;-3.4855,-4.355,1.7694;-4.3313,-5.6864,.8914;4.2776,-2.199,-.1807;4.1321,-3.2911,-1.0484;3.488,-4.4522,-.6375;2.9961,-4.5165,.6607;3.1453,-3.4624,1.5574;3.7787,-2.303,1.1274;4.4873,-3.2135,-2.0792;3.3436,-5.2881,-1.3223;2.2623,-5.7087,1.0871;2.7407,-3.5494,2.5669;3.8728,-1.4579,1.8115;-.4975,4.026,-.0076;-1.8666,3.8061,-.0818;-2.3909,3.2654,-1.2509;-1.5882,2.9719,-2.3501;-.2201,3.1927,-2.2576;-.0633,4.4039,.9211;-2.5243,4.0238,.7603;-3.8235,2.9649,-1.315;-2.0367,2.561,-3.2553;.4229,2.9388,-3.1025;2.1749,-5.9283,2.2741;1.7651,-6.4058,.2216;-4.2914,2.6491,-2.3878;-4.4638,3.0311,-.2823;6.6411,.1673,-1.9997;5.965,1.4143,-1.8621;7.8299,.0987,-2.7775;8.3159,1.209,-3.4221;8.3452,-.863,-2.8633;9.228,1.144,-4.0219;6.4771,2.5381,-2.5695;7.6204,2.4382,-3.3254;5.9461,3.4906,-2.5146;7.9926,3.3153,-3.8623;4.5753,3.9042,-.236;3.7538,5.0545,-.0507;5.9188,3.957,.2311;6.4281,5.101,.7972;6.55,3.0708,.1422;7.4633,5.1155,1.1498;4.3136,6.2283,.5253;5.6236,6.2575,.9349;3.674,7.1077,.6481;6.0426,7.1639,1.3807;-2.3689,-3.9232,-2.8614;-2.5418,-4.9608,-2.5369;-3.2509,-3.603,-3.4492;-1.5014,-3.9105,-3.54;-1.7095,-1.5881,-2.0841;-2.4494,-1.1157,-2.7559;-1.543,-.9258,-1.2208;-.7623,-1.6299,-2.6454;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662913478172</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001912467855 0.000292278092 0.020182036584 0.005343639664</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887005 -0.000484746 0.000195489 0.000334165 0.000367556 0.000387097 0.000459007 0.000512374 0.000608594 0.000688395 0.000810129 0.000899351 0.001068078 0.001135875 0.001283330 0.001322277 0.001382726 0.001524671 0.001796631 0.002010949 0.002301449 0.002465380 0.002622688 0.003142528 0.003382196 0.003761713 0.004137481 0.004355732 0.004629073 0.004715146 0.005000441 0.005200545 0.005897909 0.006025781 0.006664617 0.006795517 0.007044845 0.007294605 0.008104715 0.008332564 0.008813194 0.009188716 0.009682457 0.010000541 0.010926283 0.011172120 0.011324910 0.012031778 0.013182116 0.013381573 0.013843849 0.014553424 0.014870485 0.015448461 0.015739872 0.016429156 0.016524972 0.016848166 0.018417594 0.019159063 0.019844021 0.020261055 0.021024504 0.021586664 0.022097496 0.022688759 0.023347235 0.023596006 0.024474343 0.025825734 0.026335489 0.026574633 0.027006772 0.027194704 0.028050217 0.028788116 0.030754130 0.030991367 0.032645891 0.033280564 0.034342632 0.035717858 0.038854866 0.039185274 0.041842240 0.045352865 0.045502034 0.045864377 0.048516888 0.049440180 0.049719227 0.050148641 0.051526780 0.052008402 0.052173631 0.052283301 0.052382492 0.053335534 0.053817192 0.055403999 0.056284564 0.056528264 0.056617710 0.056967324 0.057577447 0.058334573 0.059172653 0.059583991 0.060769227 0.061950732 0.062412004 0.064167217 0.064243599 0.064826148 0.065602738 0.066824999 0.067694257 0.068835919 0.070134296 0.071777907 0.072095348 0.072511668 0.072889879 0.075286484 0.078215700 0.080602662 0.081362662 0.083148550 0.083342389 0.086449554 0.088532914 0.089295588 0.089769016 0.091266880 0.093206909 0.094485678 0.095428374 0.096076316 0.096788592 0.098072948 0.099988620 0.100369411 0.102438332 0.103255414 0.103817065 0.104974057 0.107965308 0.110394830 0.111801300 0.111929596 0.113154900 0.114283116 0.116092471 0.116750834 0.116992311 0.118471560 0.119429889 0.121769221 0.124426239 0.125409382 0.128338182 0.128769138 0.130301608 0.133412234 0.136013390 0.137396979 0.138334735 0.138560204 0.139820581 0.141673479 0.143459823 0.145555087 0.146174968 0.151633497 0.153213004 0.153338762 0.159952825 0.160838293 0.168390741 0.171302309 0.175626575 0.178731417 0.181272641 0.183836254 0.188613786 0.189151265 0.191207949 0.200624955 0.202100312 0.205980738 0.206870805 0.207206995 0.210587145 0.211872791 0.212527335 0.213438909 0.216498947 0.218243291 0.220558778 0.224009762 0.225399431 0.231797280 0.234205707 0.234665224 0.238321834 0.245222028 0.247256027 0.251124280 0.256446171 0.257140618 0.257763768 0.262252507 0.271519272 0.282672013 0.291757015 0.299574343 0.299900824 0.300907364 0.307006867 0.307725693 0.309608417 0.318620585 0.321229706 0.326270082 0.329188405 0.335265545 0.347595567 0.351944998 0.355572498 0.359553331 0.360566359 0.364045800 0.384186126 0.406709544 0.411800822 0.430135993 0.431848563 0.434515840 0.449089565 0.464382800 0.473574792 0.478650354 0.479612466 0.486463573 0.498843527 0.502656713 0.513940622 0.516319547 0.543679393 0.566850236 0.567578984 0.586030862 0.591809194 0.605628590 0.643516811 0.645214424 0.667146826 0.675517562 0.685749775 0.701079164 0.702618263 0.703328685 0.704289741 0.717081955 0.731539109 0.736927885 0.737981894 0.747196677 0.750741831 0.771602529 0.775954700 0.808015994 0.821655239 0.822201184 0.827998625 0.833886760 0.846692667 0.847425011 0.849937541 0.854220766 0.861667715 0.867449569 0.875001589 0.881174031 0.887318413 0.889737693 0.892429985 0.900819662 0.908707806 0.915521485 0.917652099 0.924392333 0.931687775 0.934902353 0.954290042 0.956832246 0.962194472 0.969611857 0.975227808 0.982263166 0.998532949 1.004397146 1.014688659 1.020528343 1.039995242 1.055024275 1.068892310 1.069464140 1.078642881 1.087238531 1.103269830 1.110251767 1.111589125 1.118243533 1.122497209 1.123502582 1.137599158 1.148252775 1.161652605 1.169961516 1.176531381 1.186641446 1.200665348 1.220668456 1.231163538 1.257742496 1.296292188 1.296541803 1.314633828 1.326338580 1.326699989 1.329867130 1.330958623 1.334648217 1.341452915 1.347796939 1.364140485 1.379505101 1.381096582 1.381558063 1.426414204 1.509773182 1.557874788 1.684618477 1.918176578</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">166</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91768926" y3="-0.95600206" z3="-0.68272186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60637949" y3="-1.95054917" z3="-1.54019265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0889163" y3="-0.99607798" z3="-1.40316842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77911924" y3="1.4773075" z3="-1.05814695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28592971" y3="0.30939862" z3="-0.50205956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66132944" y3="2.73839357" z3="-1.1632293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00772554" y3="2.73500383" z3="-0.84424009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37728128" y3="4.9931211" z3="-0.38389431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81145144" y3="3.85256997" z3="-0.9033223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74965334" y3="5.86878913" z3="-0.19087021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10130432" y3="1.61354437" z3="-1.69580043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12000958" y3="0.35439153" z3="0.20658237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71308781" y3="0.38493728" z3="-0.66228535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60203006" y3="0.73662427" z3="0.25718795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66750744" y3="-0.85448971" z3="-1.52792288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09106087" y3="-2.4683521" z3="-1.3365101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97239168" y3="-5.49555097" z3="-6.29150302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71520557" y3="-5.05866142" z3="-5.32233823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0390089" y3="-3.91201527" z3="-2.86171143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68174393" y3="-3.67782047" z3="-5.17866965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43990321" y3="-5.88260719" z3="-4.22819913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11609918" y3="-5.30319911" z3="-3.00775591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3528225" y3="-3.07285116" z3="-3.95515811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90376921" y3="-3.0126109" z3="-6.01673731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49075608" y3="-6.97047999" z3="-4.31941077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93844782" y3="-5.93406291" z3="-2.13263469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64591956" y3="-3.36105541" z3="-1.61507429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34862065" y3="-3.84191357" z3="-0.86095352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69299176" y3="-4.84545596" z3="-1.12451116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37230644" y3="-3.5368776" z3="0.5873677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38193408" y3="-3.05537092" z3="3.34519581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66528806" y3="-4.57190522" z3="1.48503957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10305409" y3="-2.25689982" z3="1.08231712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10459713" y3="-2.01868198" z3="2.45236654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66177298" y3="-4.3333219" z3="2.85829045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85692441" y3="-5.58022531" z3="1.10867262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09368838" y3="-1.41669909" z3="0.41454305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12375421" y3="-1.01235465" z3="2.80836924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85847766" y3="-5.15641758" z3="3.54928607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37236575" y3="-2.87157106" z3="4.42359859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30406355" y3="-1.73696015" z3="-3.92815327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44906143" y3="-1.32988617" z3="-3.02808192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34277254" y3="3.71072907" z3="-1.07420698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14079891" y3="-2.97920633" z3="-1.70083736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91843744" y3="-3.15809234" z3="-0.55241943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10448429" y3="-2.28415743" z3="0.38180722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83667811" y3="-0.72104538" z3="0.64102783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73202075" y3="-0.26958183" z3="-0.93195176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52878765" y3="0.47040726" z3="1.19745154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04765743" y3="-1.06150141" z3="2.0270956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39747" y3="-4.37069296" z3="-0.31303408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10475239" y3="-4.6112031" z3="0.89366761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04865003" y3="0.00963726" z3="-1.74935528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38221831" y3="0.60427938" z3="-0.74447329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37133996" y3="-1.09961289" z3="-1.28347024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64828234" y3="0.57012502" z3="0.53737229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15268229" y3="0.18176303" z3="2.19479927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00302234" y3="1.46539113" z3="1.28890771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50790158" y3="-0.11552249" z3="2.365719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86270254" y3="-1.73627036" z3="1.71207961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.53443364" y3="-1.51609779" z3="2.89307768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04196764" y3="-4.03147916" z3="0.91727527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48779928" y3="-4.35533307" z3="1.76855984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33288221" y3="-5.68516854" z3="0.88950982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27616212" y3="-2.19899358" z3="-0.18035228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13220738" y3="-3.29281507" z3="-1.0461327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48960143" y3="-4.45388203" z3="-0.6334227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99686334" y3="-4.51618714" z3="0.66459417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14526249" y3="-3.46092598" z3="1.55966859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77751919" y3="-2.30178639" z3="1.12794033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48756182" y3="-3.21678" z3="-2.07703678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34744472" y3="-5.29215465" z3="-1.31650136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26397252" y3="-5.70837742" z3="1.09244662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74072091" y3="-3.54693048" z3="2.56924284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87124786" y3="-1.45640846" z3="1.81098835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49724511" y3="4.02727409" z3="0.0019595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86663956" y3="3.80910998" z3="-0.07008199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3935595" y3="3.272108" z3="-1.2395185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59310453" y3="2.98023289" z3="-2.34139026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22443925" y3="3.19836486" z3="-2.25026376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06093265" y3="4.40233729" z3="0.93101095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52283746" y3="4.02596423" z3="0.7733441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82690688" y3="2.97495836" z3="-1.30272972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04378748" y3="2.57231714" z3="-3.24684946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41747907" y3="2.9439005" z3="-3.09472659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17660651" y3="-5.92654638" z3="2.27975805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7672444" y3="-6.40696022" z3="0.2277963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29768635" y3="2.6673734" z3="-2.37655045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46491302" y3="3.03549568" z3="-0.26842387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6355849" y3="0.16617698" z3="-2.00614564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96015616" y3="1.41338278" z3="-1.8675503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82230066" y3="0.09694578" z3="-2.78710337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30674058" y3="1.20682249" z3="-3.43368311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33717055" y3="-0.86481816" z3="-2.87376631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21713823" y3="1.14136363" z3="-4.03594416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47056922" y3="2.53681725" z3="-2.57667224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61182135" y3="2.43630385" z3="-3.33561432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93996346" y3="3.4894368" z3="-2.52065934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98273928" y3="3.31303401" z3="-3.87404523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57579911" y3="3.90367979" z3="-0.23789757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75517539" y3="5.05424462" z3="-0.04966775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92056778" y3="3.95570566" z3="0.22580735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43185332" y3="5.09917246" z3="0.79113273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55110836" y3="3.06920012" z3="0.13490473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46792365" y3="5.11314405" z3="1.14110591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3171141" y3="6.22754303" z3="0.52546227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62814076" y3="6.25600035" z3="0.93154051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67823794" y3="7.10724031" z3="0.65043608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04874396" y3="7.16198671" z3="1.37665905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36588488" y3="-3.92637271" z3="-2.86271803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54410931" y3="-4.96219049" z3="-2.53640847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24239827" y3="-3.60253933" z3="-3.45368217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49607891" y3="-3.91941449" z3="-3.53860453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70794667" y3="-1.59077806" z3="-2.08681153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44752694" y3="-1.11957766" z3="-2.75900275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54308396" y3="-0.92668988" z3="-1.2234846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75957927" y3="-1.6323634" z3="-2.64655801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9177,-.956,-.6827;6.6064,-1.9505,-1.5402;6.0889,-.9961,-1.4032;4.7791,1.4773,-1.0581;4.2859,.3094,-.5021;2.6613,2.7384,-1.1632;4.0077,2.735,-.8442;2.3773,4.9931,-.3839;1.8115,3.8526,-.9033;1.7497,5.8688,-.1909;2.1013,1.6135,-1.6958;3.12,.3544,.2066;1.7131,.3849,-.6623;.602,.7366,.2572;1.6675,-.8545,-1.5279;1.0911,-2.4684,-1.3365;1.9724,-5.4956,-6.2915;1.7152,-5.0587,-5.3223;1.039,-3.912,-2.8617;1.6817,-3.6778,-5.1787;1.4399,-5.8826,-4.2282;1.1161,-5.3032,-3.0078;1.3528,-3.0729,-3.9552;1.9038,-3.0126,-6.0167;1.4908,-6.9705,-4.3194;.9384,-5.9341,-2.1326;.6459,-3.3611,-1.6151;-.3486,-3.8419,-.861;-.693,-4.8455,-1.1245;-.3723,-3.5369,.5874;-.3819,-3.0554,3.3452;-.6653,-4.5719,1.485;-.1031,-2.2569,1.0823;-.1046,-2.0187,2.4524;-.6618,-4.3333,2.8583;-.8569,-5.5802,1.1087;.0937,-1.4167,.4145;.1238,-1.0124,2.8084;-.8585,-5.1564,3.5493;-.3724,-2.8716,4.4236;1.3041,-1.737,-3.9282;1.4491,-1.3299,-3.0281;.3428,3.7107,-1.0742;-2.1408,-2.9792,-1.7008;-2.9184,-3.1581,-.5524;-3.1045,-2.2842,.3818;-3.8367,-.721,.641;-4.732,-.2696,-.932;-2.5288,.4704,1.1975;-5.0477,-1.0615,2.0271;-3.3975,-4.3707,-.313;-4.1048,-4.6112,.8937;-4.0487,.0096,-1.7494;-5.3822,.6043,-.7445;-5.3713,-1.0996,-1.2835;-1.6483,.5701,.5374;-2.1527,.1818,2.1948;-3.003,1.4654,1.2889;-5.5079,-.1155,2.3657;-5.8627,-1.7363,1.7121;-4.5344,-1.5161,2.8931;-5.042,-4.0315,.9173;-3.4878,-4.3553,1.7686;-4.3329,-5.6852,.8895;4.2762,-2.199,-.1804;4.1322,-3.2928,-1.0461;3.4896,-4.4539,-.6334;2.9969,-4.5162,.6646;3.1453,-3.4609,1.5597;3.7775,-2.3018,1.1279;4.4876,-3.2168,-2.077;3.3474,-5.2922,-1.3165;2.264,-5.7084,1.0924;2.7407,-3.5469,2.5692;3.8712,-1.4564,1.811;-.4972,4.0273,.002;-1.8666,3.8091,-.0701;-2.3936,3.2721,-1.2395;-1.5931,2.9802,-2.3414;-.2244,3.1984,-2.2503;-.0609,4.4023,.931;-2.5228,4.026,.7733;-3.8269,2.975,-1.3027;-2.0438,2.5723,-3.2468;.4175,2.9439,-3.0947;2.1766,-5.9265,2.2798;1.7672,-6.407,.2278;-4.2977,2.6674,-2.3766;-4.4649,3.0355,-.2684;6.6356,.1662,-2.0061;5.9602,1.4134,-1.8676;7.8223,.0969,-2.7871;8.3067,1.2068,-3.4337;8.3372,-.8648,-2.8738;9.2171,1.1414,-4.0359;6.4706,2.5368,-2.5767;7.6118,2.4363,-3.3356;5.94,3.4894,-2.5207;7.9827,3.313,-3.874;4.5758,3.9037,-.2379;3.7552,5.0542,-.0497;5.9206,3.9557,.2258;6.4319,5.0992,.7911;6.5511,3.0692,.1349;7.4679,5.1131,1.1411;4.3171,6.2275,.5255;5.6281,6.256,.9315;3.6782,7.1072,.6504;6.0487,7.162,1.3767;-2.3659,-3.9264,-2.8627;-2.5441,-4.9622,-2.5364;-3.2424,-3.6025,-3.4537;-1.4961,-3.9194,-3.5386;-1.7079,-1.5908,-2.0868;-2.4475,-1.1196,-2.759;-1.5431,-.9267,-1.2235;-.7596,-1.6324,-2.6466;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662915716963</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002162390143 0.000308465219 0.019291215510 0.005333285543</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887322 -0.000625471 0.000195250 0.000336115 0.000371271 0.000387292 0.000468049 0.000512798 0.000614774 0.000691606 0.000813181 0.000899344 0.001068070 0.001138697 0.001283334 0.001322906 0.001385458 0.001524455 0.001799752 0.002013500 0.002301284 0.002471468 0.002634729 0.003147754 0.003387550 0.003763753 0.004143722 0.004358501 0.004629080 0.004715181 0.005002888 0.005200425 0.005899629 0.006025862 0.006664743 0.006798049 0.007046169 0.007296675 0.008104965 0.008332716 0.008812239 0.009193503 0.009683175 0.010003412 0.010929046 0.011198748 0.011324534 0.012036809 0.013184016 0.013381864 0.013844714 0.014553674 0.014873910 0.015448676 0.015741035 0.016483765 0.016561117 0.016849516 0.018417383 0.019160103 0.019844190 0.020261047 0.021024694 0.021589162 0.022098020 0.022689080 0.023347688 0.023596118 0.024474316 0.025825796 0.026335869 0.026575190 0.027007566 0.027195084 0.028057593 0.028810683 0.030754036 0.031066546 0.032645542 0.033324081 0.034344144 0.035718028 0.038854798 0.039186265 0.041843550 0.045352896 0.045502441 0.045863831 0.048518928 0.049442364 0.049719560 0.050151629 0.051526784 0.052009030 0.052235574 0.052283342 0.052382482 0.053336113 0.053879697 0.055404672 0.056284969 0.056527688 0.056617657 0.056967302 0.057577682 0.058334966 0.059172672 0.059588417 0.060769848 0.061954791 0.062422981 0.064170484 0.064245855 0.064826170 0.065603487 0.066829338 0.067695150 0.068836793 0.070153010 0.071777875 0.072095075 0.072511972 0.072889698 0.075286172 0.078216631 0.080605072 0.081367298 0.083148532 0.083342908 0.086449471 0.088537766 0.089295887 0.089769462 0.091266757 0.093207679 0.094485702 0.095428557 0.096080413 0.096788698 0.098073132 0.099988492 0.100369219 0.102438366 0.103258612 0.103819530 0.105081681 0.107993814 0.110408951 0.111818529 0.111945536 0.113155274 0.114286337 0.116102810 0.116752950 0.117096538 0.118471538 0.119567043 0.121770705 0.124427826 0.125409150 0.128341193 0.128777998 0.130301882 0.133412500 0.136013550 0.137414732 0.138339073 0.138560172 0.139820390 0.141674024 0.143460599 0.145555507 0.146174951 0.151634187 0.153212027 0.153339266 0.159955041 0.160841606 0.168390761 0.171302519 0.175655697 0.178731466 0.181272338 0.183839108 0.188635512 0.189160700 0.191218632 0.200651405 0.202101348 0.205986569 0.206874287 0.207207847 0.210626869 0.211888102 0.212535513 0.213438904 0.216499491 0.218243517 0.220562359 0.224028399 0.225399614 0.231797816 0.234218236 0.234668179 0.238323714 0.245237673 0.247255444 0.251126030 0.256449472 0.257145021 0.257843910 0.262252574 0.271520169 0.282672145 0.291757102 0.299574437 0.299901378 0.300908350 0.307007453 0.307725777 0.309608413 0.318634283 0.321230020 0.326270315 0.329206053 0.335265816 0.347596178 0.351945120 0.355572648 0.359562314 0.360590390 0.364046044 0.384186230 0.406710074 0.411801016 0.430136057 0.431862906 0.434606296 0.449097539 0.464382925 0.473577439 0.478654978 0.479612417 0.486463552 0.498843701 0.502657357 0.513942637 0.516320197 0.543679478 0.566850265 0.567579231 0.586037040 0.591809319 0.605628558 0.643540199 0.645214436 0.667223125 0.675517842 0.685792667 0.701078986 0.702698927 0.703414301 0.704293312 0.717082078 0.731561475 0.736932663 0.737981912 0.747202723 0.750741838 0.771602577 0.775954745 0.808019852 0.821655270 0.822292403 0.828000220 0.833886925 0.846726761 0.847443833 0.849941568 0.854262981 0.861795922 0.867451692 0.875002881 0.881176923 0.887331730 0.889740664 0.892432723 0.900821155 0.908815994 0.915524362 0.917653309 0.924392391 0.931687793 0.934920318 0.954409391 0.956835715 0.962285553 0.969611829 0.975228252 0.982264104 0.998533282 1.004418226 1.014688734 1.020534160 1.039999888 1.055025011 1.069029193 1.069757753 1.078643059 1.087249815 1.103269800 1.110252242 1.111591896 1.118284241 1.122497286 1.123502566 1.137790723 1.148258379 1.161653642 1.169961574 1.176534539 1.186655403 1.200667212 1.220678033 1.231175059 1.257742772 1.296301072 1.296575741 1.314633995 1.326338772 1.326699918 1.329867933 1.330958821 1.334649484 1.341466898 1.347816763 1.364168834 1.379505028 1.381096634 1.381558067 1.426416436 1.509770140 1.557875003 1.684618997 1.918176757</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">167</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91723251" y3="-0.95619983" z3="-0.68438979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60402486" y3="-1.95074184" z3="-1.54564734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08659016" y3="-0.99636588" z3="-1.40787581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77716004" y3="1.47695464" z3="-1.06079744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2856146" y3="0.30922056" z3="-0.50296244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65912971" y3="2.73837409" z3="-1.16005039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00635782" y3="2.73475722" z3="-0.8448012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37738586" y3="4.99301434" z3="-0.3795594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81017772" y3="3.8526516" z3="-0.8977348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75039635" y3="5.86868121" z3="-0.18505411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09754229" y3="1.61372282" z3="-1.69138742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12142006" y3="0.35451936" z3="0.20839423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7126239" y3="0.38451184" z3="-0.65727607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60357964" y3="0.73515013" z3="0.26499481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66594094" y3="-0.8546986" z3="-1.52318836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09189394" y3="-2.46869978" z3="-1.33358732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9869467" y3="-5.49740035" z3="-6.28514528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72693519" y3="-5.06032915" z3="-5.31677809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04383683" y3="-3.91334346" z3="-2.85825517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69258067" y3="-3.67938281" z3="-5.17350817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44883562" y3="-5.88415645" z3="-4.22325321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1215744" y3="-5.30457676" z3="-3.00379013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36013564" y3="-3.07423544" z3="-3.95100307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91669753" y3="-3.01430765" z3="-6.01113886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50029159" y3="-6.97209278" z3="-4.31404333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94188784" y3="-5.9353372" z3="-2.12901892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64820202" y3="-3.36207293" z3="-1.61265784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34685246" y3="-3.84425642" z3="-0.85951316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69071467" y3="-4.84761656" z3="-1.12410009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37319997" y3="-3.53950898" z3="0.58865708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38815603" y3="-3.0593434" z3="3.34648755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67085275" y3="-4.57293287" z3="1.48416952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10377095" y3="-2.26094934" z3="1.08524599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10865108" y3="-2.02263839" z3="2.45522977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66888616" y3="-4.33524076" z3="2.85744704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8594943" y3="-5.58372513" z3="1.10829423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09714141" y3="-1.42169963" z3="0.41963574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11146476" y3="-1.00882233" z3="2.80831367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86459405" y3="-5.15989043" z3="3.5487456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38104164" y3="-2.87631144" z3="4.42481176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31074566" y3="-1.738318" z3="-3.92408271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45387033" y3="-1.33123616" z3="-3.02405763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34112387" y3="3.7115727" z3="-1.06552594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13814402" y3="-2.98126336" z3="-1.7023084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9183837" y3="-3.15813677" z3="-0.55564246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10679436" y3="-2.28234112" z3="0.37672068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83728696" y3="-0.71891243" z3="0.63468233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72441919" y3="-0.26262944" z3="-0.94197142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52812654" y3="0.46763957" z3="1.19884045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05572307" y3="-1.05951901" z3="2.01365993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.3995077" y3="-4.36908956" z3="-0.31705975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10695462" y3="-4.60940338" z3="0.89044585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03713185" y3="0.02123069" z3="-1.75458645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3785937" y3="0.60815603" z3="-0.75380185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35924443" y3="-1.09340052" z3="-1.30051825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64508268" y3="0.56843023" z3="0.54100295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1543639" y3="0.17400599" z3="2.19498431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00014481" y3="1.46298153" z3="1.29333941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51651706" y3="-0.11352321" z3="2.35079162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87074536" y3="-1.73258463" z3="1.6927884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54830037" y3="-1.51582364" z3="2.88253418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04458527" y3="-4.03004666" z3="0.91323366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48947803" y3="-4.3521771" z3="1.7652703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33504977" y3="-5.6838007" z3="0.88776074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27702722" y3="-2.19909583" z3="-0.17997537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13255464" y3="-3.29366705" z3="-1.04445358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48989668" y3="-4.45407231" z3="-0.63024289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99715325" y3="-4.51488413" z3="0.66782639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14637515" y3="-3.45892167" z3="1.56178217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77936927" y3="-2.3008137" z3="1.12880136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48731293" y3="-3.21867494" z3="-2.07562592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34716394" y3="-5.29241392" z3="-1.31246116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26394645" y3="-5.70643624" z3="1.09727611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74208473" y3="-3.5437351" z3="2.57155235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87402865" y3="-1.45510311" z3="1.81124903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49661212" y3="4.02689837" z3="0.0127469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86649947" y3="3.81100625" z3="-0.05794134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39619672" y3="3.27769759" z3="-1.22801543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59775531" y3="2.98627608" z3="-2.33100837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22858173" y3="3.2017586" z3="-2.24133966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05830854" y3="4.39990995" z3="0.94155805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52098085" y3="4.02697479" z3="0.78706637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83023708" y3="2.98376522" z3="-1.28996624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05048372" y3="2.58130178" z3="-3.23685057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41129559" y3="2.94882201" z3="-3.08872587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17552394" y3="-5.92238224" z3="2.28509398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76867192" y3="-6.40729973" z3="0.23359599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30409574" y3="2.68401704" z3="-2.36490632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46574615" y3="3.03886394" z3="-0.25356254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63124491" y3="0.16558613" z3="-2.01315974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9559787" y3="1.41277553" z3="-1.87340006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81569741" y3="0.09598407" z3="-2.79751556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29808311" y3="1.20550985" z3="-3.44616159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33041019" y3="-0.86580318" z3="-2.88512478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20670807" y3="1.13974874" z3="-4.05106756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46424286" y3="2.53587054" z3="-2.58452759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60331225" y3="2.43500087" z3="-3.34671423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93368281" y3="3.48848006" z3="-2.52746523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97259203" y3="3.31144907" z3="-3.88667898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57608598" y3="3.90330054" z3="-0.2398165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75606353" y3="5.05391607" z3="-0.04898086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92213683" y3="3.95512098" z3="0.21999734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4350251" y3="5.09845615" z3="0.78409987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55240643" y3="3.06856934" z3="0.12715438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47210955" y3="5.11222208" z3="1.13100222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31957441" y3="6.22705176" z3="0.52490475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63172719" y3="6.25532514" z3="0.92716308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68105054" y3="7.10676964" z3="0.65201468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05356138" y3="7.16120179" z3="1.3713117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36147673" y3="-3.92999773" z3="-2.86343401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53864101" y3="-4.96615628" z3="-2.53617849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23964905" y3="-3.60927723" z3="-3.45658792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49076466" y3="-3.92189651" z3="-3.5381393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70366739" y3="-1.59321555" z3="-2.08941436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44200317" y3="-1.12172682" z3="-2.76342701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53858921" y3="-0.92952164" z3="-1.22678449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75569468" y3="-1.63636082" z3="-2.64899215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9172,-.9562,-.6844;6.604,-1.9507,-1.5456;6.0866,-.9964,-1.4079;4.7772,1.477,-1.0608;4.2856,.3092,-.503;2.6591,2.7384,-1.1601;4.0064,2.7348,-.8448;2.3774,4.993,-.3796;1.8102,3.8527,-.8977;1.7504,5.8687,-.1851;2.0975,1.6137,-1.6914;3.1214,.3545,.2084;1.7126,.3845,-.6573;.6036,.7352,.265;1.6659,-.8547,-1.5232;1.0919,-2.4687,-1.3336;1.9869,-5.4974,-6.2851;1.7269,-5.0603,-5.3168;1.0438,-3.9133,-2.8583;1.6926,-3.6794,-5.1735;1.4488,-5.8842,-4.2233;1.1216,-5.3046,-3.0038;1.3601,-3.0742,-3.951;1.9167,-3.0143,-6.0111;1.5003,-6.9721,-4.314;.9419,-5.9353,-2.129;.6482,-3.3621,-1.6127;-.3469,-3.8443,-.8595;-.6907,-4.8476,-1.1241;-.3732,-3.5395,.5887;-.3882,-3.0593,3.3465;-.6709,-4.5729,1.4842;-.1038,-2.2609,1.0852;-.1087,-2.0226,2.4552;-.6689,-4.3352,2.8574;-.8595,-5.5837,1.1083;.0971,-1.4217,.4196;.1115,-1.0088,2.8083;-.8646,-5.1599,3.5487;-.381,-2.8763,4.4248;1.3107,-1.7383,-3.9241;1.4539,-1.3312,-3.0241;.3411,3.7116,-1.0655;-2.1381,-2.9813,-1.7023;-2.9184,-3.1581,-.5556;-3.1068,-2.2823,.3767;-3.8373,-.7189,.6347;-4.7244,-.2626,-.942;-2.5281,.4676,1.1988;-5.0557,-1.0595,2.0137;-3.3995,-4.3691,-.3171;-4.107,-4.6094,.8904;-4.0371,.0212,-1.7546;-5.3786,.6082,-.7538;-5.3592,-1.0934,-1.3005;-1.6451,.5684,.541;-2.1544,.174,2.195;-3.0001,1.463,1.2933;-5.5165,-.1135,2.3508;-5.8707,-1.7326,1.6928;-4.5483,-1.5158,2.8825;-5.0446,-4.03,.9132;-3.4895,-4.3522,1.7653;-4.335,-5.6838,.8878;4.277,-2.1991,-.18;4.1326,-3.2937,-1.0445;3.4899,-4.4541,-.6302;2.9972,-4.5149,.6678;3.1464,-3.4589,1.5618;3.7794,-2.3008,1.1288;4.4873,-3.2187,-2.0756;3.3472,-5.2924,-1.3125;2.2639,-5.7064,1.0973;2.7421,-3.5437,2.5716;3.874,-1.4551,1.8112;-.4966,4.0269,.0127;-1.8665,3.811,-.0579;-2.3962,3.2777,-1.228;-1.5978,2.9863,-2.331;-.2286,3.2018,-2.2413;-.0583,4.3999,.9416;-2.521,4.027,.7871;-3.8302,2.9838,-1.29;-2.0505,2.5813,-3.2369;.4113,2.9488,-3.0887;2.1755,-5.9224,2.2851;1.7687,-6.4073,.2336;-4.3041,2.684,-2.3649;-4.4657,3.0389,-.2536;6.6312,.1656,-2.0132;5.956,1.4128,-1.8734;7.8157,.096,-2.7975;8.2981,1.2055,-3.4462;8.3304,-.8658,-2.8851;9.2067,1.1397,-4.0511;6.4642,2.5359,-2.5845;7.6033,2.435,-3.3467;5.9337,3.4885,-2.5275;7.9726,3.3114,-3.8867;4.5761,3.9033,-.2398;3.7561,5.0539,-.049;5.9221,3.9551,.22;6.435,5.0985,.7841;6.5524,3.0686,.1272;7.4721,5.1122,1.131;4.3196,6.2271,.5249;5.6317,6.2553,.9272;3.6811,7.1068,.652;6.0536,7.1612,1.3713;-2.3615,-3.93,-2.8634;-2.5386,-4.9662,-2.5362;-3.2396,-3.6093,-3.4566;-1.4908,-3.9219,-3.5381;-1.7037,-1.5932,-2.0894;-2.442,-1.1217,-2.7634;-1.5386,-.9295,-1.2268;-.7557,-1.6364,-2.649;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662915384872</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002222051550 0.000356378119 0.019109328097 0.005340242367</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887273 -0.000814364 0.000195307 0.000337976 0.000372114 0.000387183 0.000470862 0.000515324 0.000615791 0.000695164 0.000813092 0.000899735 0.001068055 0.001139978 0.001283338 0.001325696 0.001387108 0.001525800 0.001817975 0.002014047 0.002301357 0.002471758 0.002637337 0.003149029 0.003397426 0.003764613 0.004144209 0.004359016 0.004629136 0.004715834 0.005002603 0.005200394 0.005899305 0.006026617 0.006664808 0.006798448 0.007046955 0.007297452 0.008106786 0.008332569 0.008814331 0.009198557 0.009684933 0.010003459 0.010931242 0.011218955 0.011327937 0.012040150 0.013185026 0.013382108 0.013846105 0.014554683 0.014876235 0.015449145 0.015741531 0.016510465 0.016714283 0.016849792 0.018422513 0.019163185 0.019844839 0.020261117 0.021024646 0.021592121 0.022098141 0.022689029 0.023347552 0.023596217 0.024475018 0.025825796 0.026335601 0.026575697 0.027008476 0.027194968 0.028067239 0.028838542 0.030757276 0.031170384 0.032644892 0.033402966 0.034345082 0.035718704 0.038855042 0.039186165 0.041844292 0.045353050 0.045503351 0.045866452 0.048519616 0.049443514 0.049719679 0.050153856 0.051526786 0.052010194 0.052283257 0.052307387 0.052382499 0.053337015 0.054004585 0.055411400 0.056285085 0.056527186 0.056617592 0.056967308 0.057577738 0.058338332 0.059172993 0.059593085 0.060769729 0.061956693 0.062440575 0.064175700 0.064245524 0.064826347 0.065610231 0.066839723 0.067694945 0.068836927 0.070183258 0.071777937 0.072095580 0.072512052 0.072889495 0.075286505 0.078216752 0.080611238 0.081372858 0.083148517 0.083342720 0.086449007 0.088541852 0.089296590 0.089770355 0.091266672 0.093209629 0.094485757 0.095429688 0.096089864 0.096789048 0.098073370 0.099988953 0.100372874 0.102438389 0.103261184 0.103819997 0.105262553 0.108047594 0.110425020 0.111825532 0.111970976 0.113155276 0.114287354 0.116116007 0.116753527 0.117212499 0.118471469 0.119681414 0.121774802 0.124430195 0.125409664 0.128349586 0.128790880 0.130302602 0.133412774 0.136013522 0.137439552 0.138347928 0.138560474 0.139820242 0.141674351 0.143462719 0.145555524 0.146175836 0.151633835 0.153211061 0.153342445 0.159955469 0.160843171 0.168391016 0.171303367 0.175685382 0.178731618 0.181272719 0.183840780 0.188670927 0.189163452 0.191246904 0.200688005 0.202101839 0.205994549 0.206875012 0.207208643 0.210688705 0.211911653 0.212543818 0.213439150 0.216499454 0.218243614 0.220565795 0.224039984 0.225399867 0.231798117 0.234242784 0.234677100 0.238324654 0.245235146 0.247256439 0.251128241 0.256452978 0.257148915 0.257918490 0.262252858 0.271521814 0.282672131 0.291757653 0.299575878 0.299901437 0.300908398 0.307007412 0.307725978 0.309608516 0.318652691 0.321230340 0.326270368 0.329262759 0.335265877 0.347596594 0.351945768 0.355572745 0.359561737 0.360626864 0.364046697 0.384192868 0.406710291 0.411801067 0.430137605 0.431864751 0.434728677 0.449120002 0.464383168 0.473578053 0.478654979 0.479613513 0.486464652 0.498843821 0.502657770 0.513947363 0.516321066 0.543679592 0.566851649 0.567582599 0.586044459 0.591810210 0.605629025 0.643551677 0.645216785 0.667308426 0.675517884 0.685851621 0.701083939 0.702836942 0.703656781 0.704305272 0.717082146 0.731574709 0.736932725 0.737981932 0.747211826 0.750741855 0.771602599 0.775954769 0.808021722 0.821655270 0.822394551 0.828002820 0.833888000 0.846751050 0.847454214 0.849942060 0.854296393 0.861946955 0.867452814 0.875006995 0.881204251 0.887341939 0.889741846 0.892433382 0.900822738 0.908957636 0.915524146 0.917652974 0.924392551 0.931687947 0.934935493 0.954514087 0.956843438 0.962442266 0.969614663 0.975251165 0.982264617 0.998533365 1.004432328 1.014689996 1.020537160 1.040000300 1.055025559 1.069073691 1.070099326 1.078643680 1.087252513 1.103269797 1.110252334 1.111594949 1.118331351 1.122497340 1.123502646 1.138036687 1.148263096 1.161654829 1.169961645 1.176536121 1.186657896 1.200667468 1.220679227 1.231183737 1.257749026 1.296312461 1.296617097 1.314633977 1.326340090 1.326699972 1.329872692 1.330959126 1.334649689 1.341506807 1.347843212 1.364275655 1.379509091 1.381096977 1.381558035 1.426423195 1.509830251 1.557875091 1.684623551 1.918182437</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">168</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91542746" y3="-0.95635417" z3="-0.68611512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60042937" y3="-1.95116188" z3="-1.55076221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08318373" y3="-0.99678882" z3="-1.41225738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77494095" y3="1.47676125" z3="-1.06286884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28446915" y3="0.30924276" z3="-0.50362459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65697293" y3="2.73861597" z3="-1.15704102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00501094" y3="2.73469202" z3="-0.84506856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37800629" y3="4.99327298" z3="-0.37591913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80912797" y3="3.85313133" z3="-0.89280586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75173059" y3="5.86912224" z3="-0.17975756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09358401" y3="1.61419246" z3="-1.68700561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12184982" y3="0.35500323" z3="0.21035867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71109846" y3="0.38474106" z3="-0.65229865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60381005" y3="0.73472682" z3="0.2723011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66256988" y3="-0.85431814" z3="-1.51834652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09252104" y3="-2.47039829" z3="-1.32986431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.001784" y3="-5.49834121" z3="-6.27896698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73878988" y3="-5.0614884" z3="-5.31137398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04845837" y3="-3.91487278" z3="-2.85465571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7039601" y3="-3.68070785" z3="-5.16797965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45739059" y3="-5.88543286" z3="-4.21882106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12646915" y3="-5.30601885" z3="-3.00036247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36801696" y3="-3.07569874" z3="-3.94638224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93050346" y3="-3.01546208" z3="-6.004766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50921367" y3="-6.97328704" z3="-4.30958101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9443613" y3="-5.93692037" z3="-2.1262598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64993485" y3="-3.36399908" z3="-1.60973833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34637871" y3="-3.84597512" z3="-0.85875467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68937938" y3="-4.84966749" z3="-1.12359165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37550345" y3="-3.54079183" z3="0.58943857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39233424" y3="-3.0607715" z3="3.34745457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67094366" y3="-4.57637435" z3="1.48579961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10794133" y3="-2.26061428" z3="1.08559379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11286886" y3="-2.0233555" z3="2.45584581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67155091" y3="-4.33810613" z3="2.85910217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86118782" y3="-5.58478688" z3="1.10853908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09015186" y3="-1.41974425" z3="0.4181657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11631174" y3="-1.01914009" z3="2.81385244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86973378" y3="-5.16175455" z3="3.54945459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38469554" y3="-2.87799965" z3="4.42618537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.319125" y3="-1.73988187" z3="-3.9200739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45694113" y3="-1.33195224" z3="-3.01921103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33960628" y3="3.71306076" z3="-1.05772033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13726857" y3="-2.98394823" z3="-1.70587529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91847713" y3="-3.15921742" z3="-0.55937692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10715052" y3="-2.28238348" z3="0.37164382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83719873" y3="-0.7179162" z3="0.62723717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7159752" y3="-0.25710754" z3="-0.95218016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52855012" y3="0.46485174" z3="1.19956963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06386958" y3="-1.05746225" z3="1.99901864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39905651" y3="-4.37088372" z3="-0.31791723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10844196" y3="-4.6079377" z3="0.88854643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0252235" y3="0.03353894" z3="-1.7590742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37339179" y3="0.61095847" z3="-0.76338042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34687422" y3="-1.08715525" z3="-1.31822706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64446499" y3="0.56565085" z3="0.54434003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15874566" y3="0.16683393" z3="2.1963701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99888571" y3="1.46099753" z3="1.2960178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52537366" y3="-0.11040284" z3="2.33346176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87720131" y3="-1.72925897" z3="1.67367907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56203131" y3="-1.51456688" z3="2.87003059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04515438" y3="-4.02729735" z3="0.90950756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49224101" y3="-4.35050032" z3="1.76383685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33761082" y3="-5.68191005" z3="0.88675865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27626565" y3="-2.19891894" z3="-0.17975331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13429616" y3="-3.29595" z3="-1.04207971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49297542" y3="-4.45665249" z3="-0.62604178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99913695" y3="-4.51551577" z3="0.67169612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1457166" y3="-3.45682877" z3="1.56360594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77715041" y3="-2.2982049" z3="1.12875973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48966644" y3="-3.22284427" z3="-2.07320571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35191387" y3="-5.2968528" z3="-1.30677297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26549285" y3="-5.70623604" z3="1.10200676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74042578" y3="-3.53983167" z3="2.57313913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86893254" y3="-1.44990474" z3="1.80914486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49562249" y3="4.02711614" z3="0.02300408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86593473" y3="3.8131948" z3="-0.04527253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39852106" y3="3.2833116" z3="-1.21539456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60267171" y3="2.99312772" z3="-2.32093179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2330199" y3="3.20640205" z3="-2.23360297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05492043" y3="4.39761725" z3="0.95178303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51861572" y3="4.02834446" z3="0.80133287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83317777" y3="2.99241434" z3="-1.2755541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05777775" y3="2.5908194" z3="-3.22669955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40507929" y3="2.95401917" z3="-3.08198696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17636989" y3="-5.92088222" z3="2.28971045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76949885" y3="-6.40675818" z3="0.23852939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31008829" y3="2.7005498" z3="-2.351052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46611428" y3="3.04189819" z3="-0.23754152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62641818" y3="0.16489099" z3="-2.0194425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95164014" y3="1.4122003" z3="-1.87849735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80876486" y3="0.09494242" z3="-2.80696753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28935652" y3="1.20415032" z3="-3.4575753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32325257" y3="-0.86686164" z3="-2.89551864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19627707" y3="1.1380898" z3="-4.06500256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45799747" y3="2.53496968" z3="-2.59156004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59490895" y3="2.43369885" z3="-3.35690906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92756982" y3="3.48757409" z3="-2.53352941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96268215" y3="3.30983872" z3="-3.89845886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57673106" y3="3.90302162" z3="-0.24150895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75759638" y3="5.05380181" z3="-0.04875785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92396545" y3="3.95450068" z3="0.21505063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43872021" y3="5.09771881" z3="0.77769702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55366067" y3="3.06780572" z3="0.12104928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47667564" y3="5.11126192" z3="1.12207419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32301806" y3="6.22679366" z3="0.52351353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6362438" y3="6.25477359" z3="0.92245492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68511853" y3="7.10662031" z3="0.65196059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05958368" y3="7.16054899" z3="1.36536863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35880395" y3="-3.93422784" z3="-2.86590728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53823823" y3="-4.96937036" z3="-2.53774284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2338236" y3="-3.61206162" z3="-3.46076051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48657216" y3="-3.92850167" z3="-3.53871211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70211823" y3="-1.59669945" z3="-2.09387835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43971236" y3="-1.12568672" z3="-2.76848179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53820991" y3="-0.93153618" z3="-1.23126146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75254271" y3="-1.64030429" z3="-2.65166273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9154,-.9564,-.6861;6.6004,-1.9512,-1.5508;6.0832,-.9968,-1.4123;4.7749,1.4768,-1.0629;4.2845,.3092,-.5036;2.657,2.7386,-1.157;4.005,2.7347,-.8451;2.378,4.9933,-.3759;1.8091,3.8531,-.8928;1.7517,5.8691,-.1798;2.0936,1.6142,-1.687;3.1218,.355,.2104;1.7111,.3847,-.6523;.6038,.7347,.2723;1.6626,-.8543,-1.5183;1.0925,-2.4704,-1.3299;2.0018,-5.4983,-6.279;1.7388,-5.0615,-5.3114;1.0485,-3.9149,-2.8547;1.704,-3.6807,-5.168;1.4574,-5.8854,-4.2188;1.1265,-5.306,-3.0004;1.368,-3.0757,-3.9464;1.9305,-3.0155,-6.0048;1.5092,-6.9733,-4.3096;.9444,-5.9369,-2.1263;.6499,-3.364,-1.6097;-.3464,-3.846,-.8588;-.6894,-4.8497,-1.1236;-.3755,-3.5408,.5894;-.3923,-3.0608,3.3475;-.6709,-4.5764,1.4858;-.1079,-2.2606,1.0856;-.1129,-2.0234,2.4558;-.6716,-4.3381,2.8591;-.8612,-5.5848,1.1085;.0902,-1.4197,.4182;.1163,-1.0191,2.8139;-.8697,-5.1618,3.5495;-.3847,-2.878,4.4262;1.3191,-1.7399,-3.9201;1.4569,-1.332,-3.0192;.3396,3.7131,-1.0577;-2.1373,-2.9839,-1.7059;-2.9185,-3.1592,-.5594;-3.1072,-2.2824,.3716;-3.8372,-.7179,.6272;-4.716,-.2571,-.9522;-2.5286,.4649,1.1996;-5.0639,-1.0575,1.999;-3.3991,-4.3709,-.3179;-4.1084,-4.6079,.8885;-4.0252,.0335,-1.7591;-5.3734,.611,-.7634;-5.3469,-1.0872,-1.3182;-1.6445,.5657,.5443;-2.1587,.1668,2.1964;-2.9989,1.461,1.296;-5.5254,-.1104,2.3335;-5.8772,-1.7293,1.6737;-4.562,-1.5146,2.87;-5.0452,-4.0273,.9095;-3.4922,-4.3505,1.7638;-4.3376,-5.6819,.8868;4.2763,-2.1989,-.1798;4.1343,-3.2959,-1.0421;3.493,-4.4567,-.626;2.9991,-4.5155,.6717;3.1457,-3.4568,1.5636;3.7772,-2.2982,1.1288;4.4897,-3.2228,-2.0732;3.3519,-5.2969,-1.3068;2.2655,-5.7062,1.102;2.7404,-3.5398,2.5731;3.8689,-1.4499,1.8091;-.4956,4.0271,.023;-1.8659,3.8132,-.0453;-2.3985,3.2833,-1.2154;-1.6027,2.9931,-2.3209;-.233,3.2064,-2.2336;-.0549,4.3976,.9518;-2.5186,4.0283,.8013;-3.8332,2.9924,-1.2756;-2.0578,2.5908,-3.2267;.4051,2.954,-3.082;2.1764,-5.9209,2.2897;1.7695,-6.4068,.2385;-4.3101,2.7005,-2.3511;-4.4661,3.0419,-.2375;6.6264,.1649,-2.0194;5.9516,1.4122,-1.8785;7.8088,.0949,-2.807;8.2894,1.2042,-3.4576;8.3233,-.8669,-2.8955;9.1963,1.1381,-4.065;6.458,2.535,-2.5916;7.5949,2.4337,-3.3569;5.9276,3.4876,-2.5335;7.9627,3.3098,-3.8985;4.5767,3.903,-.2415;3.7576,5.0538,-.0488;5.924,3.9545,.2151;6.4387,5.0977,.7777;6.5537,3.0678,.121;7.4767,5.1113,1.1221;4.323,6.2268,.5235;5.6362,6.2548,.9225;3.6851,7.1066,.652;6.0596,7.1605,1.3654;-2.3588,-3.9342,-2.8659;-2.5382,-4.9694,-2.5377;-3.2338,-3.6121,-3.4608;-1.4866,-3.9285,-3.5387;-1.7021,-1.5967,-2.0939;-2.4397,-1.1257,-2.7685;-1.5382,-.9315,-1.2313;-.7525,-1.6403,-2.6517;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662914948021</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002226727465 0.000380378819 0.019468547057 0.005340153673</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887226 -0.000987344 0.000195930 0.000338343 0.000372713 0.000387869 0.000472957 0.000515118 0.000616250 0.000695476 0.000813093 0.000900075 0.001068821 0.001140542 0.001283451 0.001327159 0.001387108 0.001527210 0.001834924 0.002020073 0.002301234 0.002472381 0.002636935 0.003148985 0.003399284 0.003764827 0.004144593 0.004359070 0.004629167 0.004717897 0.005007117 0.005200323 0.005901916 0.006027654 0.006665881 0.006798398 0.007046777 0.007297364 0.008108290 0.008334196 0.008820580 0.009200471 0.009687968 0.010006235 0.010931449 0.011225278 0.011337706 0.012041332 0.013184974 0.013382110 0.013846914 0.014555953 0.014878247 0.015450733 0.015741664 0.016517457 0.016849158 0.016968304 0.018439984 0.019167270 0.019847403 0.020261568 0.021024948 0.021596049 0.022098088 0.022689013 0.023347619 0.023595935 0.024477141 0.025825906 0.026335836 0.026576034 0.027009462 0.027195358 0.028075876 0.028859072 0.030763639 0.031281731 0.032644020 0.033505295 0.034345158 0.035721310 0.038855576 0.039186039 0.041845677 0.045352996 0.045506133 0.045873803 0.048519575 0.049443261 0.049719658 0.050154510 0.051526793 0.052012254 0.052283319 0.052380360 0.052383801 0.053337660 0.054180802 0.055428922 0.056286207 0.056526415 0.056619001 0.056967365 0.057577843 0.058345141 0.059173468 0.059597072 0.060769747 0.061956798 0.062457897 0.064180691 0.064249425 0.064827149 0.065625608 0.066869127 0.067696065 0.068837073 0.070221158 0.071777995 0.072098053 0.072512055 0.072889315 0.075286819 0.078217110 0.080619960 0.081378402 0.083148498 0.083343045 0.086449239 0.088545528 0.089296868 0.089770945 0.091266506 0.093212101 0.094485721 0.095431683 0.096104804 0.096789634 0.098074750 0.099990877 0.100381419 0.102438423 0.103265470 0.103820175 0.105498098 0.108123752 0.110446162 0.111830199 0.112008913 0.113156287 0.114287334 0.116124585 0.116753767 0.117326526 0.118471403 0.119795160 0.121781020 0.124432343 0.125412726 0.128360677 0.128802088 0.130305850 0.133412732 0.136013555 0.137473582 0.138361647 0.138562731 0.139820061 0.141674375 0.143464549 0.145556546 0.146182480 0.151636202 0.153209931 0.153349237 0.159957373 0.160842948 0.168392724 0.171303870 0.175703673 0.178734515 0.181273658 0.183840587 0.188722185 0.189163250 0.191308555 0.200715312 0.202102351 0.206008220 0.206874969 0.207209196 0.210786596 0.211935153 0.212550027 0.213440186 0.216499469 0.218243674 0.220568578 0.224040375 0.225400218 0.231798209 0.234291305 0.234698647 0.238325719 0.245235330 0.247255781 0.251129291 0.256455707 0.257152416 0.257980037 0.262253031 0.271524742 0.282672277 0.291760212 0.299575827 0.299901612 0.300909165 0.307007371 0.307726812 0.309608499 0.318702649 0.321232694 0.326270501 0.329348205 0.335265952 0.347597247 0.351949687 0.355572879 0.359562048 0.360677766 0.364048490 0.384199445 0.406711238 0.411801003 0.430140234 0.431865631 0.434806339 0.449185840 0.464383098 0.473577911 0.478656379 0.479623605 0.486465184 0.498843813 0.502659030 0.513947612 0.516321184 0.543679810 0.566856047 0.567587158 0.586052852 0.591809794 0.605628987 0.643563350 0.645220521 0.667405273 0.675519376 0.685917650 0.701084394 0.702929002 0.704116572 0.704408496 0.717082431 0.731582200 0.736935863 0.737982049 0.747211490 0.750741857 0.771602605 0.775954802 0.808022585 0.821655601 0.822532287 0.828010097 0.833888153 0.846765494 0.847456837 0.849943259 0.854323678 0.862151739 0.867453326 0.875008551 0.881239457 0.887347981 0.889742402 0.892434223 0.900824154 0.909054155 0.915526923 0.917652783 0.924392556 0.931688065 0.934949215 0.954598191 0.956852948 0.962719094 0.969617492 0.975260331 0.982264829 0.998534162 1.004443315 1.014692904 1.020538404 1.040000641 1.055025966 1.069099659 1.070441017 1.078648714 1.087252479 1.103269883 1.110252337 1.111596581 1.118382963 1.122497341 1.123503130 1.138396587 1.148268776 1.161655171 1.169962077 1.176536189 1.186660354 1.200667731 1.220681147 1.231184960 1.257764897 1.296324228 1.296663868 1.314634179 1.326339967 1.326701004 1.329874096 1.330962303 1.334651761 1.341566926 1.347897125 1.364460315 1.379521728 1.381100033 1.381558191 1.426424725 1.509826609 1.557875128 1.684635386 1.918183554</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">169</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9141732" y3="-0.95633856" z3="-0.6874709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5972751" y3="-1.95151595" z3="-1.5553417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08025723" y3="-0.9971049" z3="-1.41632763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77285107" y3="1.47653615" z3="-1.06575991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28356211" y3="0.30945006" z3="-0.50458894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6550356" y3="2.73914524" z3="-1.1551195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00384915" y3="2.73481638" z3="-0.84655572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37853651" y3="4.9938613" z3="-0.37245382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80809034" y3="3.85392949" z3="-0.88818068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75288694" y3="5.86980872" z3="-0.17430674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09012765" y3="1.61477449" z3="-1.68360921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12260863" y3="0.35617218" z3="0.21194619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70980744" y3="0.38598674" z3="-0.64734115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60491783" y3="0.73694353" z3="0.27968502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65907965" y3="-0.85360156" z3="-1.51243548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09282754" y3="-2.47073948" z3="-1.32694995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01597856" y3="-5.4992293" z3="-6.2730618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75028778" y3="-5.06243632" z3="-5.30612687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05316534" y3="-3.91603694" z3="-2.85127136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71539041" y3="-3.68158819" z3="-5.16263166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46541891" y3="-5.88653982" z3="-4.21452109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13127389" y3="-5.30724978" z3="-2.99683861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37582001" y3="-3.07664649" z3="-3.9419557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94462367" y3="-3.01631094" z3="-5.99871877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51707329" y3="-6.97441944" z3="-4.30533531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94677732" y3="-5.93826099" z3="-2.12323336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65190142" y3="-3.3650094" z3="-1.60743875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34505984" y3="-3.84801785" z3="-0.85756668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68762262" y3="-4.85141575" z3="-1.12353136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37586449" y3="-3.54369045" z3="0.59047363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39630415" y3="-3.06411258" z3="3.348524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67581885" y3="-4.5771789" z3="1.48530979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1066756" y3="-2.26582439" z3="1.08790568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11395556" y3="-2.02778071" z3="2.45805373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67634455" y3="-4.34004375" z3="2.85879111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86471754" y3="-5.58713502" z3="1.10854073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09677042" y3="-1.42713194" z3="0.42278028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10528243" y3="-1.01287202" z3="2.81106292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87432114" y3="-5.16437946" z3="3.54956667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39186805" y3="-2.88089492" z3="4.42684035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32669868" y3="-1.74080067" z3="-3.9152648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46199411" y3="-1.33305315" z3="-3.01441281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33806824" y3="3.71474005" z3="-1.04969245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13509597" y3="-2.98637808" z3="-1.70679447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91800053" y3="-3.16093532" z3="-0.56167905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10858531" y3="-2.28296213" z3="0.36803451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8371412" y3="-0.71704383" z3="0.62059278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70730239" y3="-0.25348137" z3="-0.96344407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5291145" y3="0.46198822" z3="1.20132047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07255462" y3="-1.0547206" z3="1.98535704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39955708" y3="-4.37147039" z3="-0.32100525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11083848" y3="-4.60788332" z3="0.8845123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01207764" y3="0.0406762" z3="-1.76537773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36857895" y3="0.61194906" z3="-0.77551249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33312381" y3="-1.08442172" z3="-1.33667605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6418376" y3="0.56358184" z3="0.54938499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16266368" y3="0.16082907" z3="2.19819223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99877293" y3="1.45838313" z3="1.29958799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53333132" y3="-0.10732444" z3="2.31802839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88626603" y3="-1.7241732" z3="1.65421052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57725848" y3="-1.51425949" z3="2.85948574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04743207" y3="-4.02682486" z3="0.90358912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49582525" y3="-4.35019366" z3="1.76052344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34051753" y3="-5.68166316" z3="0.88305563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27623004" y3="-2.19887217" z3="-0.17926094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13476707" y3="-3.29674838" z3="-1.04010792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49343427" y3="-4.45680411" z3="-0.62288739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99821015" y3="-4.51366106" z3="0.67437948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14526671" y3="-3.454911" z3="1.56517763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77750415" y3="-2.2975054" z3="1.1294292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49086298" y3="-3.22512327" z3="-2.07107006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35369243" y3="-5.29816974" z3="-1.30230877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26499827" y3="-5.70444246" z3="1.10628444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73973253" y3="-3.53694234" z3="2.57466529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87054043" y3="-1.45012151" z3="1.80954554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49446766" y3="4.02740994" z3="0.03336493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86512682" y3="3.81505584" z3="-0.03229576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4009677" y3="3.28891594" z3="-1.20277218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60779178" y3="3.00008544" z3="-2.31049023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23758185" y3="3.21087961" z3="-2.2251478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05141716" y3="4.39559915" z3="0.96191119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51567527" y3="4.02901883" z3="0.81637377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83634925" y3="3.00109635" z3="-1.26117381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06538619" y3="2.60089359" z3="-3.2165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39832356" y3="2.95961413" z3="-3.07550048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17494037" y3="-5.9170192" z3="2.29461942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77123871" y3="-6.40799473" z3="0.24388673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31670762" y3="2.71756665" z3="-2.33740334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46632832" y3="3.04447702" z3="-0.2208847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62196876" y3="0.16406386" z3="-2.02575424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94757082" y3="1.41145272" z3="-1.88405045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80231622" y3="0.09353863" z3="-2.81620794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28126418" y3="1.20229383" z3="-3.46875301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31652024" y3="-0.86835814" z3="-2.90546071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18659562" y3="1.1357738" z3="-4.07848876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45223031" y3="2.53381406" z3="-2.59889766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58719405" y3="2.43200033" z3="-3.36702008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9220366" y3="3.48652347" z3="-2.53991987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95366648" y3="3.30780476" z3="-3.90996662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57742905" y3="3.90298263" z3="-0.24439447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75902981" y3="5.05404572" z3="-0.04909619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92589234" y3="3.95401365" z3="0.208583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44238599" y3="5.09706776" z3="0.77005526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55519562" y3="3.06706364" z3="0.11266357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48124134" y3="5.11023242" z3="1.11172498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3262282" y3="6.22688985" z3="0.52184685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64052498" y3="6.25445312" z3="0.91725577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68887256" y3="7.10700309" z3="0.65229855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06524746" y3="7.16012239" z3="1.35914722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35492735" y3="-3.93730464" z3="-2.86656402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53695098" y3="-4.97171678" z3="-2.53724016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22836907" y3="-3.61528859" z3="-3.46489231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48099286" y3="-3.93423944" z3="-3.53719733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70003332" y3="-1.59911627" z3="-2.09485857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.437955" y3="-1.12912719" z3="-2.77007485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53624106" y3="-0.93384403" z3="-1.23276342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75120244" y3="-1.64225196" z3="-2.65267148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9142,-.9563,-.6875;6.5973,-1.9515,-1.5553;6.0803,-.9971,-1.4163;4.7729,1.4765,-1.0658;4.2836,.3095,-.5046;2.655,2.7391,-1.1551;4.0038,2.7348,-.8466;2.3785,4.9939,-.3725;1.8081,3.8539,-.8882;1.7529,5.8698,-.1743;2.0901,1.6148,-1.6836;3.1226,.3562,.2119;1.7098,.386,-.6473;.6049,.7369,.2797;1.6591,-.8536,-1.5124;1.0928,-2.4707,-1.3269;2.016,-5.4992,-6.2731;1.7503,-5.0624,-5.3061;1.0532,-3.916,-2.8513;1.7154,-3.6816,-5.1626;1.4654,-5.8865,-4.2145;1.1313,-5.3072,-2.9968;1.3758,-3.0766,-3.942;1.9446,-3.0163,-5.9987;1.5171,-6.9744,-4.3053;.9468,-5.9383,-2.1232;.6519,-3.365,-1.6074;-.3451,-3.848,-.8576;-.6876,-4.8514,-1.1235;-.3759,-3.5437,.5905;-.3963,-3.0641,3.3485;-.6758,-4.5772,1.4853;-.1067,-2.2658,1.0879;-.114,-2.0278,2.4581;-.6763,-4.34,2.8588;-.8647,-5.5871,1.1085;.0968,-1.4271,.4228;.1053,-1.0129,2.8111;-.8743,-5.1644,3.5496;-.3919,-2.8809,4.4268;1.3267,-1.7408,-3.9153;1.462,-1.3331,-3.0144;.3381,3.7147,-1.0497;-2.1351,-2.9864,-1.7068;-2.918,-3.1609,-.5617;-3.1086,-2.283,.368;-3.8371,-.717,.6206;-4.7073,-.2535,-.9634;-2.5291,.462,1.2013;-5.0726,-1.0547,1.9854;-3.3996,-4.3715,-.321;-4.1108,-4.6079,.8845;-4.0121,.0407,-1.7654;-5.3686,.6119,-.7755;-5.3331,-1.0844,-1.3367;-1.6418,.5636,.5494;-2.1627,.1608,2.1982;-2.9988,1.4584,1.2996;-5.5333,-.1073,2.318;-5.8863,-1.7242,1.6542;-4.5773,-1.5143,2.8595;-5.0474,-4.0268,.9036;-3.4958,-4.3502,1.7605;-4.3405,-5.6817,.8831;4.2762,-2.1989,-.1793;4.1348,-3.2967,-1.0401;3.4934,-4.4568,-.6229;2.9982,-4.5137,.6744;3.1453,-3.4549,1.5652;3.7775,-2.2975,1.1294;4.4909,-3.2251,-2.0711;3.3537,-5.2982,-1.3023;2.265,-5.7044,1.1063;2.7397,-3.5369,2.5747;3.8705,-1.4501,1.8095;-.4945,4.0274,.0334;-1.8651,3.8151,-.0323;-2.401,3.2889,-1.2028;-1.6078,3.0001,-2.3105;-.2376,3.2109,-2.2251;-.0514,4.3956,.9619;-2.5157,4.029,.8164;-3.8363,3.0011,-1.2612;-2.0654,2.6009,-3.2165;.3983,2.9596,-3.0755;2.1749,-5.917,2.2946;1.7712,-6.408,.2439;-4.3167,2.7176,-2.3374;-4.4663,3.0445,-.2209;6.622,.1641,-2.0258;5.9476,1.4115,-1.8841;7.8023,.0935,-2.8162;8.2813,1.2023,-3.4688;8.3165,-.8684,-2.9055;9.1866,1.1358,-4.0785;6.4522,2.5338,-2.5989;7.5872,2.432,-3.367;5.922,3.4865,-2.5399;7.9537,3.3078,-3.91;4.5774,3.903,-.2444;3.759,5.054,-.0491;5.9259,3.954,.2086;6.4424,5.0971,.7701;6.5552,3.0671,.1127;7.4812,5.1102,1.1117;4.3262,6.2269,.5218;5.6405,6.2545,.9173;3.6889,7.107,.6523;6.0652,7.1601,1.3591;-2.3549,-3.9373,-2.8666;-2.537,-4.9717,-2.5372;-3.2284,-3.6153,-3.4649;-1.481,-3.9342,-3.5372;-1.7,-1.5991,-2.0949;-2.438,-1.1291,-2.7701;-1.5362,-.9338,-1.2328;-.7512,-1.6423,-2.6527;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662914313720</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002906305961 0.000400911702 0.017707381852 0.005338236594</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887235 -0.001063175 0.000195918 0.000338682 0.000372716 0.000387974 0.000473135 0.000515243 0.000617465 0.000695486 0.000813361 0.000900337 0.001070973 0.001140808 0.001283501 0.001327272 0.001387571 0.001527336 0.001834782 0.002038688 0.002301242 0.002477696 0.002639994 0.003153759 0.003399888 0.003765800 0.004150282 0.004363272 0.004629184 0.004717949 0.005016010 0.005200250 0.005913232 0.006027558 0.006667682 0.006801014 0.007048693 0.007300942 0.008108298 0.008339670 0.008825099 0.009200257 0.009688957 0.010018029 0.010931517 0.011224475 0.011347266 0.012041214 0.013185462 0.013385217 0.013847033 0.014556563 0.014880987 0.015452067 0.015741961 0.016521053 0.016849165 0.017247164 0.018463674 0.019170019 0.019852622 0.020262006 0.021026293 0.021598468 0.022098419 0.022689058 0.023348588 0.023595828 0.024481056 0.025826078 0.026336808 0.026576732 0.027011682 0.027196302 0.028085422 0.028865299 0.030771230 0.031360495 0.032644031 0.033608185 0.034345215 0.035724322 0.038856249 0.039186798 0.041847411 0.045352951 0.045509023 0.045883045 0.048521222 0.049444710 0.049720112 0.050154518 0.051526813 0.052015677 0.052283351 0.052382481 0.052447033 0.053337747 0.054359476 0.055455807 0.056289814 0.056526412 0.056623676 0.056967376 0.057577937 0.058354972 0.059173960 0.059599380 0.060770683 0.061956778 0.062472237 0.064183256 0.064265672 0.064829244 0.065645865 0.066925840 0.067703321 0.068837154 0.070261369 0.071778039 0.072098995 0.072512491 0.072889163 0.075286679 0.078225719 0.080624832 0.081383621 0.083148612 0.083344301 0.086449243 0.088546976 0.089296973 0.089771247 0.091266381 0.093215133 0.094485864 0.095433763 0.096120776 0.096789751 0.098079388 0.099993532 0.100384494 0.102438427 0.103273540 0.103821622 0.105741897 0.108209997 0.110473324 0.111834431 0.112058503 0.113164657 0.114287799 0.116130994 0.116753712 0.117427879 0.118471266 0.119914258 0.121785890 0.124435363 0.125419338 0.128366774 0.128807910 0.130310119 0.133412756 0.136014026 0.137506184 0.138374753 0.138568194 0.139820089 0.141674429 0.143464611 0.145558871 0.146187423 0.151638660 0.153209117 0.153358751 0.159957286 0.160842444 0.168398393 0.171303967 0.175707151 0.178741095 0.181274415 0.183843139 0.188766333 0.189166961 0.191388489 0.200735232 0.202103975 0.206028399 0.206875585 0.207209535 0.210920357 0.211960365 0.212552398 0.213442741 0.216500148 0.218243949 0.220569513 0.224041824 0.225400310 0.231798330 0.234371358 0.234755329 0.238326448 0.245234700 0.247255244 0.251129598 0.256456223 0.257155355 0.258011242 0.262253044 0.271528364 0.282672878 0.291764005 0.299575825 0.299902291 0.300911642 0.307007389 0.307728668 0.309608527 0.318767691 0.321236434 0.326270713 0.329462448 0.335265953 0.347599085 0.351952500 0.355573296 0.359567156 0.360740916 0.364050791 0.384206609 0.406713274 0.411801760 0.430144642 0.431865726 0.434835321 0.449311049 0.464383032 0.473578795 0.478661728 0.479652267 0.486467553 0.498844047 0.502662490 0.513947636 0.516322116 0.543680613 0.566861739 0.567591929 0.586063005 0.591813837 0.605629260 0.643572342 0.645226039 0.667500922 0.675519461 0.685994660 0.701090993 0.702971814 0.704246518 0.705034547 0.717082585 0.731582338 0.736935737 0.737982205 0.747220349 0.750741863 0.771602611 0.775955015 0.808031518 0.821655790 0.822711789 0.828023956 0.833888298 0.846769188 0.847456918 0.849953225 0.854341615 0.862388664 0.867453414 0.875010702 0.881303311 0.887349269 0.889742456 0.892438155 0.900824930 0.909093546 0.915528050 0.917655985 0.924392558 0.931688080 0.934953867 0.954658942 0.956862780 0.963073251 0.969627447 0.975286860 0.982265016 0.998535549 1.004447321 1.014697214 1.020538412 1.040002617 1.055026299 1.069119355 1.070720460 1.078665020 1.087253998 1.103269854 1.110252493 1.111597535 1.118427412 1.122497354 1.123503879 1.138861423 1.148276737 1.161655561 1.169962508 1.176536434 1.186681832 1.200669349 1.220704325 1.231184978 1.257783596 1.296330496 1.296690193 1.314634377 1.326340487 1.326700945 1.329876190 1.330963716 1.334651992 1.341619972 1.348010826 1.364677104 1.379531362 1.381102748 1.381558346 1.426425614 1.509842382 1.557875212 1.684645313 1.918182835</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">170</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9135904" y3="-0.95643209" z3="-0.68880594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59496041" y3="-1.95183238" z3="-1.55991888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07799341" y3="-0.99748005" z3="-1.42033705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77117185" y3="1.47633365" z3="-1.06797353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28339803" y3="0.30945171" z3="-0.50508549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65301924" y3="2.73913562" z3="-1.15150818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00276301" y3="2.73470595" z3="-0.84688453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37917964" y3="4.99412811" z3="-0.3693267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80721325" y3="3.85416442" z3="-0.88302971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75426422" y3="5.87019157" z3="-0.17023773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0861612" y3="1.61490123" z3="-1.67822138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12422198" y3="0.35635396" z3="0.21431266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7094732" y3="0.3852046" z3="-0.64158068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6064295" y3="0.73393043" z3="0.28851988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65734061" y3="-0.8538052" z3="-1.50756704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09375996" y3="-2.47211176" z3="-1.32309573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03104913" y3="-5.499713" z3="-6.26705478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76234334" y3="-5.063123" z3="-5.30087419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05794632" y3="-3.91713973" z3="-2.84772457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72731415" y3="-3.68236313" z3="-5.1570691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47382151" y3="-5.88743064" z3="-4.21038243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13604505" y3="-5.30832012" z3="-2.99364448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38424997" y3="-3.07760475" z3="-3.93722782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95936119" y3="-3.0168412" z3="-5.99216704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52559657" y3="-6.97532495" z3="-4.30124849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94893593" y3="-5.93960968" z3="-2.1208473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6538816" y3="-3.36656165" z3="-1.60452643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34390248" y3="-3.85015594" z3="-0.85646808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68533455" y3="-4.85401487" z3="-1.12261896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37816377" y3="-3.54475711" z3="0.59148158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40474519" y3="-3.06424408" z3="3.34882898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67753318" y3="-4.58002646" z3="1.48643846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11174592" y3="-2.2643102" z3="1.08851082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12182328" y3="-2.02667218" z3="2.45842487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68306597" y3="-4.34139031" z3="2.85947565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86580321" y3="-5.58935409" z3="1.10892541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09005501" y3="-1.42399899" z3="0.42175878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10678508" y3="-1.02291927" z3="2.8173378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88373988" y3="-5.16515211" z3="3.54905222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40049897" y3="-2.8817268" z3="4.42749217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33612487" y3="-1.74178708" z3="-3.91093404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.466698" y3="-1.33340294" z3="-3.00914895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33681579" y3="3.71565392" z3="-1.04130243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13347727" y3="-2.98920798" z3="-1.70982877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91868256" y3="-3.16160807" z3="-0.56579959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11109846" y3="-2.28235114" z3="0.36233866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83792653" y3="-0.7163407" z3="0.61454152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70053784" y3="-0.24678258" z3="-0.97161973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5283778" y3="0.45770479" z3="1.20272361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08048222" y3="-1.05418579" z3="1.97230556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40081512" y3="-4.37224588" z3="-0.32404485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11349789" y3="-4.6073715" z3="0.88116779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00235255" y3="0.0540062" z3="-1.76841285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36519241" y3="0.61586476" z3="-0.78287945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32297923" y3="-1.07701361" z3="-1.3517384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63994155" y3="0.55994211" z3="0.5533212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16553371" y3="0.15085471" z3="2.19917829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99517013" y3="1.45489488" z3="1.30363093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54207346" y3="-0.10569257" z3="2.30273435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89312389" y3="-1.72205384" z3="1.63650314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5904257" y3="-1.51431851" z3="2.84849699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0504596" y3="-4.02669746" z3="0.89835479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49923124" y3="-4.34811779" z3="1.75762104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34278321" y3="-5.68155353" z3="0.88103176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27657567" y3="-2.19863404" z3="-0.17869764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13507209" y3="-3.29762074" z3="-1.03821046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49414914" y3="-4.45747076" z3="-0.61937957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99953199" y3="-4.51343113" z3="0.67814211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14617648" y3="-3.45298824" z3="1.56756139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77806931" y3="-2.29565133" z3="1.13024956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49007147" y3="-3.22670694" z3="-2.0695693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35332774" y3="-5.2987763" z3="-1.29814543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26505272" y3="-5.70279485" z3="1.11086564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74056827" y3="-3.53360944" z3="2.57714461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87002663" y3="-1.44629301" z3="1.80897843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49306335" y3="4.02636149" z3="0.04441975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86425921" y3="3.81628215" z3="-0.0194649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40311034" y3="3.29387404" z3="-1.19017564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61248853" y3="3.00660438" z3="-2.29991991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24187113" y3="3.21550338" z3="-2.21700958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04753156" y3="4.39199376" z3="0.97279599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51285474" y3="4.02917859" z3="0.83078902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83890382" y3="3.00838332" z3="-1.24658812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0723872" y3="2.61030338" z3="-3.20593492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39144434" y3="2.96684169" z3="-3.07056842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17376401" y3="-5.91366568" z3="2.29912372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77096151" y3="-6.40633593" z3="0.24874916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3223714" y3="2.73276017" z3="-2.32359098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4662624" y3="3.04591339" z3="-0.20459407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61796842" y3="0.16336184" z3="-2.03192542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94376831" y3="1.4107963" z3="-1.88939276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79627085" y3="0.09233298" z3="-2.82539838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27340091" y3="1.2006141" z3="-3.48007404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31032131" y3="-0.86958793" z3="-2.91525902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17714441" y3="1.1336991" z3="-4.09212253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44645205" y3="2.53260706" z3="-2.60650493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57943471" y3="2.43028996" z3="-3.37752198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91627625" y3="3.48526699" z3="-2.54703418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9444121" y3="3.30567484" z3="-3.92214924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57814955" y3="3.90299758" z3="-0.24672675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76049895" y3="5.05416438" z3="-0.04961095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92787906" y3="3.95406103" z3="0.20242896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44606429" y3="5.09721627" z3="0.76204012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55678524" y3="3.06710555" z3="0.10537093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4859087" y3="5.11036347" z3="1.10070444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32936612" y3="6.22706123" z3="0.5194185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64476892" y3="6.25463473" z3="0.911088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69242257" y3="7.10714551" z3="0.65133089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07077748" y3="7.16034336" z3="1.35158337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35140098" y3="-3.94198544" z3="-2.86861877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5324" y3="-4.97652849" z3="-2.53873505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22474823" y3="-3.62127595" z3="-3.46773031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47657674" y3="-3.93762092" z3="-3.53801615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6962433" y3="-1.60286494" z3="-2.09959477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43191321" y3="-1.13178738" z3="-2.77652847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53331913" y3="-0.93725692" z3="-1.23753764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74593771" y3="-1.64845908" z3="-2.65586719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9136,-.9564,-.6888;6.595,-1.9518,-1.5599;6.078,-.9975,-1.4203;4.7712,1.4763,-1.068;4.2834,.3095,-.5051;2.653,2.7391,-1.1515;4.0028,2.7347,-.8469;2.3792,4.9941,-.3693;1.8072,3.8542,-.883;1.7543,5.8702,-.1702;2.0862,1.6149,-1.6782;3.1242,.3564,.2143;1.7095,.3852,-.6416;.6064,.7339,.2885;1.6573,-.8538,-1.5076;1.0938,-2.4721,-1.3231;2.031,-5.4997,-6.2671;1.7623,-5.0631,-5.3009;1.0579,-3.9171,-2.8477;1.7273,-3.6824,-5.1571;1.4738,-5.8874,-4.2104;1.136,-5.3083,-2.9936;1.3842,-3.0776,-3.9372;1.9594,-3.0168,-5.9922;1.5256,-6.9753,-4.3012;.9489,-5.9396,-2.1208;.6539,-3.3666,-1.6045;-.3439,-3.8502,-.8565;-.6853,-4.854,-1.1226;-.3782,-3.5448,.5915;-.4047,-3.0642,3.3488;-.6775,-4.58,1.4864;-.1117,-2.2643,1.0885;-.1218,-2.0267,2.4584;-.6831,-4.3414,2.8595;-.8658,-5.5894,1.1089;.0901,-1.424,.4218;.1068,-1.0229,2.8173;-.8837,-5.1652,3.5491;-.4005,-2.8817,4.4275;1.3361,-1.7418,-3.9109;1.4667,-1.3334,-3.0091;.3368,3.7157,-1.0413;-2.1335,-2.9892,-1.7098;-2.9187,-3.1616,-.5658;-3.1111,-2.2824,.3623;-3.8379,-.7163,.6145;-4.7005,-.2468,-.9716;-2.5284,.4577,1.2027;-5.0805,-1.0542,1.9723;-3.4008,-4.3722,-.324;-4.1135,-4.6074,.8812;-4.0024,.054,-1.7684;-5.3652,.6159,-.7829;-5.323,-1.077,-1.3517;-1.6399,.5599,.5533;-2.1655,.1509,2.1992;-2.9952,1.4549,1.3036;-5.5421,-.1057,2.3027;-5.8931,-1.7221,1.6365;-4.5904,-1.5143,2.8485;-5.0505,-4.0267,.8984;-3.4992,-4.3481,1.7576;-4.3428,-5.6816,.881;4.2766,-2.1986,-.1787;4.1351,-3.2976,-1.0382;3.4941,-4.4575,-.6194;2.9995,-4.5134,.6781;3.1462,-3.453,1.5676;3.7781,-2.2957,1.1302;4.4901,-3.2267,-2.0696;3.3533,-5.2988,-1.2981;2.2651,-5.7028,1.1109;2.7406,-3.5336,2.5771;3.87,-1.4463,1.809;-.4931,4.0264,.0444;-1.8643,3.8163,-.0195;-2.4031,3.2939,-1.1902;-1.6125,3.0066,-2.2999;-.2419,3.2155,-2.217;-.0475,4.392,.9728;-2.5129,4.0292,.8308;-3.8389,3.0084,-1.2466;-2.0724,2.6103,-3.2059;.3914,2.9668,-3.0706;2.1738,-5.9137,2.2991;1.771,-6.4063,.2487;-4.3224,2.7328,-2.3236;-4.4663,3.0459,-.2046;6.618,.1634,-2.0319;5.9438,1.4108,-1.8894;7.7963,.0923,-2.8254;8.2734,1.2006,-3.4801;8.3103,-.8696,-2.9153;9.1771,1.1337,-4.0921;6.4465,2.5326,-2.6065;7.5794,2.4303,-3.3775;5.9163,3.4853,-2.547;7.9444,3.3057,-3.9221;4.5781,3.903,-.2467;3.7605,5.0542,-.0496;5.9279,3.9541,.2024;6.4461,5.0972,.762;6.5568,3.0671,.1054;7.4859,5.1104,1.1007;4.3294,6.2271,.5194;5.6448,6.2546,.9111;3.6924,7.1071,.6513;6.0708,7.1603,1.3516;-2.3514,-3.942,-2.8686;-2.5324,-4.9765,-2.5387;-3.2247,-3.6213,-3.4677;-1.4766,-3.9376,-3.538;-1.6962,-1.6029,-2.0996;-2.4319,-1.1318,-2.7765;-1.5333,-.9373,-1.2375;-.7459,-1.6485,-2.6559;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662915518365</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002802950785 0.000386720380 0.018713539941 0.005338928624</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887181 -0.000968793 0.000196363 0.000338596 0.000373094 0.000388022 0.000473594 0.000516153 0.000619026 0.000695965 0.000813256 0.000900312 0.001070955 0.001141043 0.001283510 0.001327980 0.001388136 0.001527480 0.001839792 0.002051099 0.002301664 0.002484328 0.002643353 0.003155743 0.003406254 0.003769508 0.004158337 0.004372448 0.004629267 0.004718374 0.005019081 0.005200901 0.005927200 0.006028650 0.006672343 0.006807716 0.007054226 0.007309620 0.008109193 0.008342427 0.008825762 0.009202097 0.009689133 0.010030873 0.010931604 0.011226415 0.011350123 0.012044548 0.013185864 0.013395045 0.013847444 0.014556283 0.014882252 0.015453173 0.015742469 0.016522520 0.016850534 0.017497530 0.018475883 0.019169977 0.019857536 0.020261958 0.021028873 0.021599124 0.022100919 0.022688990 0.023349414 0.023595678 0.024485403 0.025826285 0.026338197 0.026577266 0.027014894 0.027198513 0.028092851 0.028865072 0.030776595 0.031398711 0.032646172 0.033689238 0.034345253 0.035725935 0.038858174 0.039187481 0.041847998 0.045353364 0.045512081 0.045885154 0.048525582 0.049449731 0.049722002 0.050155652 0.051526821 0.052020677 0.052283361 0.052382568 0.052502855 0.053337707 0.054499281 0.055488383 0.056297697 0.056529773 0.056633015 0.056967355 0.057578199 0.058366622 0.059174151 0.059599922 0.060772803 0.061956870 0.062482340 0.064183620 0.064290894 0.064833717 0.065662510 0.067001579 0.067719438 0.068837514 0.070302571 0.071778149 0.072099594 0.072513220 0.072888998 0.075286697 0.078248902 0.080628292 0.081389060 0.083148582 0.083345887 0.086449612 0.088547390 0.089296929 0.089771200 0.091266381 0.093216659 0.094485873 0.095436098 0.096133574 0.096789753 0.098088746 0.099994104 0.100384079 0.102438897 0.103290978 0.103831931 0.105940185 0.108292230 0.110496956 0.111838901 0.112113117 0.113185351 0.114288530 0.116131863 0.116754546 0.117497217 0.118471406 0.120036680 0.121788099 0.124438090 0.125422956 0.128369279 0.128809017 0.130313251 0.133413308 0.136014161 0.137528179 0.138385881 0.138574139 0.139820064 0.141675234 0.143465438 0.145560381 0.146187078 0.151640018 0.153212713 0.153361321 0.159958203 0.160841944 0.168408078 0.171303940 0.175707429 0.178747643 0.181274581 0.183850613 0.188793641 0.189181147 0.191464764 0.200745752 0.202107173 0.206056278 0.206876156 0.207209595 0.211089121 0.211987490 0.212552409 0.213444883 0.216500695 0.218245161 0.220569626 0.224050028 0.225400314 0.231798518 0.234448679 0.234872765 0.238327788 0.245233336 0.247258911 0.251133571 0.256456181 0.257157709 0.258021787 0.262253453 0.271532170 0.282673887 0.291765452 0.299576059 0.299903378 0.300915992 0.307007343 0.307731829 0.309609484 0.318845258 0.321237915 0.326271349 0.329555275 0.335265970 0.347603828 0.351953741 0.355574943 0.359569119 0.360822412 0.364054209 0.384206027 0.406718628 0.411803273 0.430151412 0.431865839 0.434835532 0.449504989 0.464384131 0.473581478 0.478667468 0.479714719 0.486468724 0.498845543 0.502670433 0.513949229 0.516328439 0.543683175 0.566864080 0.567592684 0.586076780 0.591814722 0.605629208 0.643581536 0.645228198 0.667588884 0.675519463 0.686054813 0.701090929 0.703003526 0.704263282 0.705775796 0.717083475 0.731584847 0.736938899 0.737982426 0.747238517 0.750741978 0.771602650 0.775955708 0.808055900 0.821656243 0.822924174 0.828045629 0.833888689 0.846769181 0.847459575 0.849971351 0.854349415 0.862637780 0.867453418 0.875010685 0.881337817 0.887349238 0.889743148 0.892442222 0.900825747 0.909095083 0.915528585 0.917658790 0.924392568 0.931688608 0.934954028 0.954696839 0.956868676 0.963490717 0.969637422 0.975294036 0.982266183 0.998536261 1.004447784 1.014701271 1.020541309 1.040005476 1.055026434 1.069137009 1.070892551 1.078703749 1.087256017 1.103270921 1.110252711 1.111597663 1.118459398 1.122497374 1.123504271 1.139424392 1.148285805 1.161658691 1.169962536 1.176538136 1.186732006 1.200672231 1.220748700 1.231185874 1.257798830 1.296333153 1.296694270 1.314634687 1.326341073 1.326701583 1.329876228 1.330963918 1.334652530 1.341635606 1.348151271 1.364826974 1.379531239 1.381102772 1.381558306 1.426430311 1.509855897 1.557875293 1.684650742 1.918195067</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">171</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91195711" y3="-0.95618988" z3="-0.68979723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59139928" y3="-1.95227967" z3="-1.5639057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07479186" y3="-0.99779414" z3="-1.42386891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76920874" y3="1.47633495" z3="-1.07036065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28242802" y3="0.30998617" z3="-0.50551307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65133774" y3="2.7397176" z3="-1.14967455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00177615" y3="2.73501428" z3="-0.84817745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3802354" y3="4.99502224" z3="-0.36672553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80660238" y3="3.85519785" z3="-0.87911323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75595185" y3="5.87130401" z3="-0.16555397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08292842" y3="1.61540252" z3="-1.67452773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12492514" y3="0.35802143" z3="0.21649635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70803448" y3="0.38676676" z3="-0.63613739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60720156" y3="0.73703015" z3="0.29585416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65367526" y3="-0.85308775" z3="-1.5006038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09395004" y3="-2.47335504" z3="-1.31949281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04556159" y3="-5.49926194" z3="-6.26137752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77400651" y3="-5.06317339" z3="-5.29579279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06250595" y3="-3.91838745" z3="-2.84421757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73913159" y3="-3.6825224" z3="-5.15125607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48157694" y3="-5.8880026" z3="-4.20675428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14029596" y3="-5.30950603" z3="-2.99075283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39238348" y3="-3.07831203" z3="-3.93221165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97407713" y3="-3.01661435" z3="-5.98522263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53306312" y3="-6.97581411" z3="-4.29816522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95027183" y3="-5.94122893" z3="-2.11891784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6555596" y3="-3.3682092" z3="-1.60185995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34380938" y3="-3.85165718" z3="-0.85598148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68467443" y3="-4.85534227" z3="-1.12304417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38033168" y3="-3.54706905" z3="0.59182936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40799541" y3="-3.06783801" z3="3.35019165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68322717" y3="-4.5807219" z3="1.48623684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11166003" y3="-2.2694939" z3="1.08992847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.122025" y3="-2.03184551" z3="2.46027748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68783962" y3="-4.34349612" z3="2.85977698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87274202" y3="-5.58946379" z3="1.10852851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09410257" y3="-1.43083704" z3="0.42493998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09810867" y3="-1.01788689" z3="2.81413778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88880498" y3="-5.16741514" z3="3.5502345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40642928" y3="-2.88451172" z3="4.42864187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34454699" y3="-1.74254948" z3="-3.90528304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47135085" y3="-1.33443598" z3="-3.00320846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3356442" y3="3.71772004" z3="-1.03410032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1319553" y3="-2.99160337" z3="-1.71275827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91829988" y3="-3.16351928" z3="-0.56936418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11091523" y3="-2.28381557" z3="0.35805269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83750049" y3="-0.71640377" z3="0.60806656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69197213" y3="-0.24351997" z3="-0.98170018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52987131" y3="0.45466327" z3="1.20484537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08811426" y3="-1.0531503" z3="1.95895157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40077884" y3="-4.3738692" z3="-0.32678108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11583989" y3="-4.60692192" z3="0.87715001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99021518" y3="0.06239018" z3="-1.77327765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36042104" y3="0.61595733" z3="-0.79254207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3092637" y3="-1.07429443" z3="-1.36921552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63851495" y3="0.55702596" z3="0.55881588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17087098" y3="0.14517607" z3="2.20207445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99655917" y3="1.45202478" z3="1.30708886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54960547" y3="-0.10457574" z3="2.28785857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89997891" y3="-1.71943817" z3="1.6177896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6041368" y3="-1.51539099" z3="2.83772991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05137424" y3="-4.0244602" z3="0.8929129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50303364" y3="-4.34881287" z3="1.75439874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34705576" y3="-5.68023257" z3="0.87678835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27592257" y3="-2.19808085" z3="-0.17778276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13661993" y3="-3.29928346" z3="-1.03530091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49629323" y3="-4.45893652" z3="-0.61505712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99946512" y3="-4.51204917" z3="0.68174092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1448144" y3="-3.45004224" z3="1.56959047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77645967" y3="-2.29318982" z3="1.13102048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49307206" y3="-3.23077341" z3="-2.06641134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35828632" y3="-5.30294201" z3="-1.29208315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26480525" y3="-5.7011002" z3="1.11555523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73850531" y3="-3.52919325" z3="2.57900195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86774714" y3="-1.44317015" z3="1.80864024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49127547" y3="4.02554199" z3="0.05484785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86264023" y3="3.8162748" z3="-0.00566153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40474477" y3="3.29841982" z3="-1.17692831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61723797" y3="3.01436487" z3="-2.29017643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24617858" y3="3.22149965" z3="-2.2097538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04316735" y3="4.38779194" z3="0.98344012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50899752" y3="4.02678567" z3="0.84714214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84124627" y3="3.01558707" z3="-1.23151336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07991054" y3="2.62191213" z3="-3.19666224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38515387" y3="2.97442111" z3="-3.06433109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1729423" y3="-5.91067211" z3="2.30415304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77115885" y3="-6.40573721" z3="0.25401943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32806139" y3="2.74790365" z3="-2.30875777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46557965" y3="3.04671682" z3="-0.18739639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6135159" y3="0.16249667" z3="-2.03759883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93978403" y3="1.41008839" z3="-1.89447446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78989227" y3="0.09081503" z3="-2.83386986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26536732" y3="1.19853653" z3="-3.49071902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30373541" y3="-0.87116883" z3="-2.92418603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16755874" y3="1.13109644" z3="-4.10499644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44070852" y3="2.53134251" z3="-2.61368491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57169927" y3="2.42834002" z3="-3.38750724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91069209" y3="3.48407648" z3="-2.55352323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93527553" y3="3.30323513" z3="-3.93387146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57918517" y3="3.90324442" z3="-0.24973518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7624721" y3="5.05475367" z3="-0.05076256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93007428" y3="3.9539766" z3="0.19606047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45022615" y3="5.09719767" z3="0.75378395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55837777" y3="3.06669063" z3="0.09781507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49091542" y3="5.11015312" z3="1.08982711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33335315" y3="6.22770932" z3="0.51618986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64984003" y3="6.2550227" z3="0.90430361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69712926" y3="7.10811104" z3="0.64933548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07747748" y3="7.16081396" z3="1.34307743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34800701" y3="-3.94507084" z3="-2.87113657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53228393" y3="-4.97851681" z3="-2.54010299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21839439" y3="-3.6233384" z3="-3.47344663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47148471" y3="-3.94442927" z3="-3.53849372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69540365" y3="-1.60529698" z3="-2.10187619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43212041" y3="-1.13568946" z3="-2.77834012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53262019" y3="-0.93877794" z3="-1.24007195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74528284" y3="-1.64923876" z3="-2.65773113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.912,-.9562,-.6898;6.5914,-1.9523,-1.5639;6.0748,-.9978,-1.4239;4.7692,1.4763,-1.0704;4.2824,.31,-.5055;2.6513,2.7397,-1.1497;4.0018,2.735,-.8482;2.3802,4.995,-.3667;1.8066,3.8552,-.8791;1.756,5.8713,-.1656;2.0829,1.6154,-1.6745;3.1249,.358,.2165;1.708,.3868,-.6361;.6072,.737,.2959;1.6537,-.8531,-1.5006;1.094,-2.4734,-1.3195;2.0456,-5.4993,-6.2614;1.774,-5.0632,-5.2958;1.0625,-3.9184,-2.8442;1.7391,-3.6825,-5.1513;1.4816,-5.888,-4.2068;1.1403,-5.3095,-2.9908;1.3924,-3.0783,-3.9322;1.9741,-3.0166,-5.9852;1.5331,-6.9758,-4.2982;.9503,-5.9412,-2.1189;.6556,-3.3682,-1.6019;-.3438,-3.8517,-.856;-.6847,-4.8553,-1.123;-.3803,-3.5471,.5918;-.408,-3.0678,3.3502;-.6832,-4.5807,1.4862;-.1117,-2.2695,1.0899;-.122,-2.0318,2.4603;-.6878,-4.3435,2.8598;-.8727,-5.5895,1.1085;.0941,-1.4308,.4249;.0981,-1.0179,2.8141;-.8888,-5.1674,3.5502;-.4064,-2.8845,4.4286;1.3445,-1.7425,-3.9053;1.4714,-1.3344,-3.0032;.3356,3.7177,-1.0341;-2.132,-2.9916,-1.7128;-2.9183,-3.1635,-.5694;-3.1109,-2.2838,.3581;-3.8375,-.7164,.6081;-4.692,-.2435,-.9817;-2.5299,.4547,1.2048;-5.0881,-1.0532,1.959;-3.4008,-4.3739,-.3268;-4.1158,-4.6069,.8772;-3.9902,.0624,-1.7733;-5.3604,.616,-.7925;-5.3093,-1.0743,-1.3692;-1.6385,.557,.5588;-2.1709,.1452,2.2021;-2.9966,1.452,1.3071;-5.5496,-.1046,2.2879;-5.9,-1.7194,1.6178;-4.6041,-1.5154,2.8377;-5.0514,-4.0245,.8929;-3.503,-4.3488,1.7544;-4.3471,-5.6802,.8768;4.2759,-2.1981,-.1778;4.1366,-3.2993,-1.0353;3.4963,-4.4589,-.6151;2.9995,-4.512,.6817;3.1448,-3.45,1.5696;3.7765,-2.2932,1.131;4.4931,-3.2308,-2.0664;3.3583,-5.3029,-1.2921;2.2648,-5.7011,1.1156;2.7385,-3.5292,2.579;3.8677,-1.4432,1.8086;-.4913,4.0255,.0548;-1.8626,3.8163,-.0057;-2.4047,3.2984,-1.1769;-1.6172,3.0144,-2.2902;-.2462,3.2215,-2.2098;-.0432,4.3878,.9834;-2.509,4.0268,.8471;-3.8412,3.0156,-1.2315;-2.0799,2.6219,-3.1967;.3852,2.9744,-3.0643;2.1729,-5.9107,2.3042;1.7712,-6.4057,.254;-4.3281,2.7479,-2.3088;-4.4656,3.0467,-.1874;6.6135,.1625,-2.0376;5.9398,1.4101,-1.8945;7.7899,.0908,-2.8339;8.2654,1.1985,-3.4907;8.3037,-.8712,-2.9242;9.1676,1.1311,-4.105;6.4407,2.5313,-2.6137;7.5717,2.4283,-3.3875;5.9107,3.4841,-2.5535;7.9353,3.3032,-3.9339;4.5792,3.9032,-.2497;3.7625,5.0548,-.0508;5.9301,3.954,.1961;6.4502,5.0972,.7538;6.5584,3.0667,.0978;7.4909,5.1102,1.0898;4.3334,6.2277,.5162;5.6498,6.255,.9043;3.6971,7.1081,.6493;6.0775,7.1608,1.3431;-2.348,-3.9451,-2.8711;-2.5323,-4.9785,-2.5401;-3.2184,-3.6233,-3.4734;-1.4715,-3.9444,-3.5385;-1.6954,-1.6053,-2.1019;-2.4321,-1.1357,-2.7783;-1.5326,-.9388,-1.2401;-.7453,-1.6492,-2.6577;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662918098702</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002563909416 0.000348602340 0.017719085660 0.005331349241</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887211 -0.000769474 0.000195998 0.000339152 0.000373671 0.000389724 0.000474325 0.000516838 0.000620959 0.000696516 0.000813446 0.000900429 0.001070974 0.001141096 0.001283800 0.001331557 0.001388194 0.001527532 0.001861973 0.002051127 0.002301490 0.002489393 0.002646223 0.003156650 0.003421525 0.003772317 0.004160958 0.004379951 0.004629259 0.004720547 0.005019590 0.005199827 0.005931569 0.006030198 0.006671952 0.006813911 0.007061176 0.007314708 0.008114381 0.008342781 0.008825928 0.009204539 0.009689804 0.010034778 0.010931672 0.011231311 0.011350715 0.012054244 0.013185951 0.013409478 0.013847860 0.014556028 0.014882480 0.015452826 0.015742868 0.016522993 0.016851296 0.017676413 0.018476756 0.019170962 0.019864762 0.020262322 0.021031955 0.021599331 0.022103467 0.022689071 0.023349954 0.023595531 0.024487358 0.025826247 0.026339112 0.026577978 0.027018558 0.027199507 0.028097929 0.028867779 0.030778746 0.031408306 0.032647254 0.033740430 0.034345280 0.035726072 0.038862277 0.039187236 0.041848006 0.045353465 0.045512026 0.045887012 0.048532101 0.049456768 0.049724345 0.050159437 0.051526835 0.052025746 0.052283370 0.052382712 0.052545142 0.053337846 0.054584573 0.055512553 0.056304956 0.056534237 0.056640778 0.056967311 0.057578245 0.058379173 0.059174152 0.059599984 0.060774495 0.061956809 0.062489839 0.064183876 0.064316301 0.064839077 0.065676238 0.067067515 0.067737731 0.068838167 0.070339085 0.071778297 0.072099261 0.072513847 0.072888854 0.075286875 0.078288375 0.080629441 0.081396462 0.083148584 0.083349011 0.086451877 0.088547498 0.089297020 0.089771422 0.091266651 0.093217929 0.094486317 0.095437827 0.096142823 0.096790400 0.098098629 0.099994061 0.100388913 0.102439438 0.103313815 0.103853750 0.106065434 0.108356864 0.110514260 0.111840880 0.112155337 0.113215779 0.114291414 0.116131867 0.116757634 0.117539563 0.118473069 0.120133768 0.121787856 0.124439687 0.125424585 0.128369987 0.128809311 0.130314428 0.133413990 0.136014177 0.137532965 0.138393858 0.138575619 0.139820601 0.141676429 0.143468566 0.145560750 0.146191016 0.151640107 0.153217282 0.153363243 0.159958117 0.160842410 0.168416490 0.171303984 0.175719623 0.178753069 0.181277143 0.183859907 0.188801118 0.189207282 0.191514807 0.200755347 0.202110616 0.206085596 0.206876304 0.207209590 0.211256497 0.212027338 0.212552813 0.213446354 0.216500849 0.218247544 0.220570018 0.224055685 0.225400494 0.231798887 0.234491916 0.235031715 0.238328227 0.245234241 0.247261876 0.251145125 0.256457033 0.257159635 0.258022359 0.262254908 0.271534244 0.282674086 0.291765421 0.299575977 0.299904535 0.300918744 0.307007341 0.307735061 0.309610148 0.318881099 0.321237856 0.326271651 0.329622226 0.335266087 0.347604544 0.351953670 0.355576235 0.359573823 0.360912827 0.364057073 0.384207166 0.406720512 0.411803152 0.430159186 0.431866080 0.434836464 0.449705344 0.464384983 0.473587266 0.478670535 0.479798869 0.486472843 0.498848293 0.502680280 0.513950398 0.516345374 0.543683675 0.566864313 0.567592765 0.586092426 0.591823167 0.605629903 0.643582606 0.645228756 0.667651327 0.675521814 0.686092661 0.701091087 0.703038615 0.704270697 0.706337091 0.717083603 0.731602710 0.736942842 0.737982454 0.747252786 0.750742173 0.771602734 0.775956377 0.808085714 0.821656261 0.823129100 0.828065333 0.833889139 0.846771400 0.847462561 0.849991699 0.854350252 0.862838307 0.867453442 0.875010684 0.881354929 0.887352592 0.889743224 0.892443003 0.900825903 0.909098644 0.915530417 0.917664785 0.924392565 0.931690674 0.934955756 0.954734647 0.956871660 0.963860748 0.969652783 0.975303803 0.982267342 0.998536686 1.004451264 1.014705564 1.020558110 1.040008728 1.055026480 1.069158262 1.070956508 1.078763806 1.087257012 1.103271071 1.110252809 1.111597671 1.118476925 1.122497395 1.123504414 1.139996884 1.148292119 1.161665154 1.169962637 1.176541184 1.186793535 1.200674366 1.220803295 1.231188451 1.257801633 1.296333132 1.296700051 1.314634671 1.326341653 1.326705932 1.329876016 1.330968699 1.334653057 1.341635965 1.348272862 1.364902618 1.379537952 1.381104549 1.381558477 1.426431927 1.509855994 1.557875356 1.684651227 1.918201255</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">172</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91136423" y3="-0.95607532" z3="-0.69025117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58908744" y3="-1.95266597" z3="-1.56703703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07257375" y3="-0.99817285" z3="-1.42686629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76749401" y3="1.4761253" z3="-1.07299262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28203137" y3="0.31023711" z3="-0.50602839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64963135" y3="2.74028957" z3="-1.14698729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00097141" y3="2.73519916" z3="-0.84945336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38122919" y3="4.99594532" z3="-0.36400506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80604868" y3="3.85610352" z3="-0.87437688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.757703" y3="5.87231975" z3="-0.16179559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07914185" y3="1.61617591" z3="-1.67010499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12613218" y3="0.35890194" z3="0.2184281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70743295" y3="0.3870547" z3="-0.63099133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60857186" y3="0.73581432" z3="0.30397337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6514491" y3="-0.85247509" z3="-1.49602466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09457432" y3="-2.47324568" z3="-1.31686189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06022709" y3="-5.49916387" z3="-6.2559765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.78572749" y3="-5.0632036" z3="-5.29111976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06711521" y3="-3.91876936" z3="-2.84133345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.750475" y3="-3.68249524" z3="-5.14643105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4899196" y3="-5.88827629" z3="-4.20308698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14520603" y3="-5.30995619" z3="-2.98791394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40008653" y3="-3.07845663" z3="-3.92827061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98802957" y3="-3.01639158" z3="-5.97956668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54151663" y3="-6.97615616" z3="-4.2945269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95281798" y3="-5.94197448" z3="-2.11673307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65753298" y3="-3.36861014" z3="-1.5998895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34166115" y3="-3.85414715" z3="-0.85451969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68149569" y3="-4.85808401" z3="-1.12207607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3808014" y3="-3.54882484" z3="0.5931506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41758537" y3="-3.06695393" z3="3.3499329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68550136" y3="-4.5829351" z3="1.4868863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11442892" y3="-2.26881031" z3="1.09095187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12953415" y3="-2.03029179" z3="2.46062989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69561938" y3="-4.34394487" z3="2.85981792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87257689" y3="-5.59310159" z3="1.10937444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09209434" y3="-1.42981063" z3="0.42479976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09750588" y3="-1.02508643" z3="2.8191254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90001564" y3="-5.16716055" z3="3.54882154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4174655" y3="-2.88405683" z3="4.42843607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35225192" y3="-1.7426367" z3="-3.90139324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47555437" y3="-1.33418649" z3="-2.99884509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33474216" y3="3.71889306" z3="-1.02571376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12975882" y3="-2.99462477" z3="-1.71399774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91849837" y3="-3.16545855" z3="-0.5725462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11389808" y3="-2.2845237" z3="0.35345026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83805483" y3="-0.71639916" z3="0.60236998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6848519" y3="-0.2389362" z3="-0.99020768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52966888" y3="0.45000186" z3="1.20729254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09605811" y3="-1.05304979" z3="1.94632757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.402217" y3="-4.37504271" z3="-0.33124402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11943911" y3="-4.60792859" z3="0.87148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.97947351" y3="0.07184277" z3="-1.7768849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35697645" y3="0.61806448" z3="-0.80169216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29781594" y3="-1.06972161" z3="-1.3842749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63622105" y3="0.55368414" z3="0.56460687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17462144" y3="0.13573545" z3="2.20418315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99451377" y3="1.44793136" z3="1.31141504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55732201" y3="-0.1036433" z3="2.27361483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90787284" y3="-1.71690843" z3="1.60007052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61773544" y3="-1.51726682" z3="2.82698556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05614126" y3="-4.02646551" z3="0.88426808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50828301" y3="-4.34785388" z3="1.74985768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34941929" y3="-5.68197495" z3="0.87202003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27629848" y3="-2.19774183" z3="-0.17623354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13533119" y3="-3.29876073" z3="-1.03287749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49463494" y3="-4.45761127" z3="-0.61133817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99875566" y3="-4.51018971" z3="0.68577665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14588715" y3="-3.44833809" z3="1.57281881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77835227" y3="-2.29244002" z3="1.13312184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49060172" y3="-3.23055803" z3="-2.06430151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35460435" y3="-5.30050507" z3="-1.28795973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26361344" y3="-5.69852906" z3="1.12092222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74010712" y3="-3.52662427" z3="2.58248886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87119848" y3="-1.44271457" z3="1.8104618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4893436" y3="4.02359198" z3="0.06592464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86119116" y3="3.81605946" z3="0.00738409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40663777" y3="3.30291002" z3="-1.1644236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62175246" y3="3.02155596" z3="-2.27963472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25027274" y3="3.22707514" z3="-2.20168913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03873783" y3="4.38283454" z3="0.99423071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5052254" y3="4.0243524" z3="0.86236121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84334865" y3="3.0215745" z3="-1.21642097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08676944" y3="2.63272129" z3="-3.18627804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37815511" y3="2.98393674" z3="-3.06062592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17070445" y3="-5.90611784" z3="2.30975058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77099499" y3="-6.40489093" z3="0.26018675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33349123" y3="2.761998" z3="-2.29440401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46480775" y3="3.04631065" z3="-0.1704537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60961017" y3="0.16148041" z3="-2.0432283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9360861" y3="1.40913359" z3="-1.89985301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78402305" y3="0.08899579" z3="-2.84232693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25780812" y3="1.19604047" z3="-3.50150171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29766402" y3="-0.87307741" z3="-2.93291257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15847542" y3="1.12797697" z3="-4.1179432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43520858" y3="2.52967252" z3="-2.62140553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56433665" y3="2.42592768" z3="-3.39783358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90528967" y3="3.48243435" z3="-2.56094259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92656636" y3="3.30029155" z3="-3.94592546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58028666" y3="3.90357459" z3="-0.25315065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76438231" y3="5.05540703" z3="-0.05200148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93255312" y3="3.95408875" z3="0.1885028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45456447" y3="5.09734448" z3="0.74442795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56044143" y3="3.0666079" z3="0.08856293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49632049" y3="5.11003429" z3="1.0772624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33711657" y3="6.22837463" z3="0.51312776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65476686" y3="6.25544236" z3="0.8972962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70142563" y3="7.10902141" z3="0.64821388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08380911" y3="7.16125095" z3="1.33472778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34373892" y3="-3.94875601" z3="-2.87215051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52622252" y3="-4.98263942" z3="-2.54152627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21506024" y3="-3.62909385" z3="-3.47504997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4665665" y3="-3.9456439" z3="-3.53842502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69205563" y3="-1.608553" z3="-2.10390058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42747957" y3="-1.13836744" z3="-2.78186091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52979959" y3="-0.94262733" z3="-1.24217288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74152279" y3="-1.65397618" z3="-2.65908725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9114,-.9561,-.6903;6.5891,-1.9527,-1.567;6.0726,-.9982,-1.4269;4.7675,1.4761,-1.073;4.282,.3102,-.506;2.6496,2.7403,-1.147;4.001,2.7352,-.8495;2.3812,4.9959,-.364;1.806,3.8561,-.8744;1.7577,5.8723,-.1618;2.0791,1.6162,-1.6701;3.1261,.3589,.2184;1.7074,.3871,-.631;.6086,.7358,.304;1.6514,-.8525,-1.496;1.0946,-2.4732,-1.3169;2.0602,-5.4992,-6.256;1.7857,-5.0632,-5.2911;1.0671,-3.9188,-2.8413;1.7505,-3.6825,-5.1464;1.4899,-5.8883,-4.2031;1.1452,-5.31,-2.9879;1.4001,-3.0785,-3.9283;1.988,-3.0164,-5.9796;1.5415,-6.9762,-4.2945;.9528,-5.942,-2.1167;.6575,-3.3686,-1.5999;-.3417,-3.8541,-.8545;-.6815,-4.8581,-1.1221;-.3808,-3.5488,.5932;-.4176,-3.067,3.3499;-.6855,-4.5829,1.4869;-.1144,-2.2688,1.091;-.1295,-2.0303,2.4606;-.6956,-4.3439,2.8598;-.8726,-5.5931,1.1094;.0921,-1.4298,.4248;.0975,-1.0251,2.8191;-.9,-5.1672,3.5488;-.4175,-2.8841,4.4284;1.3523,-1.7426,-3.9014;1.4756,-1.3342,-2.9988;.3347,3.7189,-1.0257;-2.1298,-2.9946,-1.714;-2.9185,-3.1655,-.5725;-3.1139,-2.2845,.3535;-3.8381,-.7164,.6024;-4.6849,-.2389,-.9902;-2.5297,.45,1.2073;-5.0961,-1.053,1.9463;-3.4022,-4.375,-.3312;-4.1194,-4.6079,.8715;-3.9795,.0718,-1.7769;-5.357,.6181,-.8017;-5.2978,-1.0697,-1.3843;-1.6362,.5537,.5646;-2.1746,.1357,2.2042;-2.9945,1.4479,1.3114;-5.5573,-.1036,2.2736;-5.9079,-1.7169,1.6001;-4.6177,-1.5173,2.827;-5.0561,-4.0265,.8843;-3.5083,-4.3479,1.7499;-4.3494,-5.682,.872;4.2763,-2.1977,-.1762;4.1353,-3.2988,-1.0329;3.4946,-4.4576,-.6113;2.9988,-4.5102,.6858;3.1459,-3.4483,1.5728;3.7784,-2.2924,1.1331;4.4906,-3.2306,-2.0643;3.3546,-5.3005,-1.288;2.2636,-5.6985,1.1209;2.7401,-3.5266,2.5825;3.8712,-1.4427,1.8105;-.4893,4.0236,.0659;-1.8612,3.8161,.0074;-2.4066,3.3029,-1.1644;-1.6218,3.0216,-2.2796;-.2503,3.2271,-2.2017;-.0387,4.3828,.9942;-2.5052,4.0244,.8624;-3.8433,3.0216,-1.2164;-2.0868,2.6327,-3.1863;.3782,2.9839,-3.0606;2.1707,-5.9061,2.3098;1.771,-6.4049,.2602;-4.3335,2.762,-2.2944;-4.4648,3.0463,-.1705;6.6096,.1615,-2.0432;5.9361,1.4091,-1.8999;7.784,.089,-2.8423;8.2578,1.196,-3.5015;8.2977,-.8731,-2.9329;9.1585,1.128,-4.1179;6.4352,2.5297,-2.6214;7.5643,2.4259,-3.3978;5.9053,3.4824,-2.5609;7.9266,3.3003,-3.9459;4.5803,3.9036,-.2532;3.7644,5.0554,-.052;5.9326,3.9541,.1885;6.4546,5.0973,.7444;6.5604,3.0666,.0886;7.4963,5.11,1.0773;4.3371,6.2284,.5131;5.6548,6.2554,.8973;3.7014,7.109,.6482;6.0838,7.1613,1.3347;-2.3437,-3.9488,-2.8722;-2.5262,-4.9826,-2.5415;-3.2151,-3.6291,-3.475;-1.4666,-3.9456,-3.5384;-1.6921,-1.6086,-2.1039;-2.4275,-1.1384,-2.7819;-1.5298,-.9426,-1.2422;-.7415,-1.654,-2.6591;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662919027272</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002343035756 0.000308163877 0.017807260080 0.005331377097</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887513 -0.000597485 0.000195341 0.000338985 0.000374438 0.000390866 0.000475500 0.000516993 0.000623244 0.000696547 0.000814139 0.000900483 0.001071690 0.001141084 0.001285394 0.001335292 0.001388562 0.001527471 0.001895616 0.002054814 0.002301542 0.002491898 0.002649136 0.003156380 0.003431361 0.003775754 0.004162494 0.004384774 0.004629780 0.004721991 0.005019941 0.005199958 0.005931388 0.006029950 0.006672032 0.006818571 0.007065759 0.007316322 0.008120361 0.008342667 0.008827660 0.009204382 0.009692697 0.010034244 0.010932464 0.011235990 0.011350705 0.012071946 0.013187570 0.013421606 0.013849034 0.014556369 0.014882641 0.015453213 0.015743296 0.016522903 0.016851236 0.017799662 0.018478151 0.019180863 0.019875235 0.020264515 0.021036908 0.021603085 0.022108869 0.022689067 0.023350286 0.023596542 0.024487877 0.025826241 0.026339269 0.026577861 0.027020250 0.027201877 0.028098621 0.028875885 0.030778687 0.031410328 0.032648027 0.033772941 0.034345656 0.035727850 0.038869018 0.039187265 0.041849378 0.045353480 0.045512069 0.045885668 0.048538584 0.049464966 0.049727105 0.050170634 0.051526836 0.052030132 0.052283368 0.052382791 0.052578440 0.053337849 0.054630355 0.055530674 0.056311160 0.056540419 0.056647776 0.056967282 0.057578264 0.058391345 0.059174309 0.059600050 0.060778064 0.061956848 0.062494659 0.064184000 0.064344247 0.064846623 0.065686158 0.067105084 0.067759168 0.068839097 0.070370381 0.071778474 0.072099420 0.072513846 0.072888771 0.075286682 0.078327170 0.080630213 0.081407104 0.083148613 0.083351129 0.086455440 0.088548379 0.089297317 0.089772195 0.091266923 0.093217964 0.094487861 0.095439574 0.096146263 0.096791651 0.098107037 0.099995461 0.100399626 0.102440147 0.103338159 0.103895301 0.106123294 0.108407025 0.110522190 0.111841727 0.112176844 0.113240682 0.114294393 0.116134372 0.116762582 0.117553599 0.118473480 0.120199560 0.121787773 0.124439548 0.125424392 0.128370731 0.128809431 0.130314678 0.133414515 0.136014212 0.137532757 0.138403050 0.138575485 0.139820772 0.141677189 0.143471082 0.145560842 0.146204584 0.151641276 0.153227817 0.153363251 0.159958476 0.160843360 0.168419459 0.171304062 0.175747383 0.178754025 0.181288667 0.183866493 0.188801119 0.189235485 0.191543555 0.200761793 0.202114524 0.206116526 0.206876388 0.207209590 0.211409938 0.212068274 0.212554949 0.213446312 0.216501365 0.218247719 0.220570535 0.224055746 0.225400898 0.231799574 0.234511756 0.235167052 0.238328873 0.245232703 0.247269115 0.251157031 0.256458679 0.257160329 0.258022443 0.262259958 0.271535025 0.282674320 0.291766536 0.299576040 0.299904692 0.300919170 0.307007527 0.307737977 0.309611630 0.318896116 0.321240046 0.326271718 0.329641892 0.335266082 0.347604645 0.351953883 0.355577741 0.359575501 0.361005292 0.364060249 0.384221833 0.406721850 0.411803213 0.430165326 0.431866567 0.434839656 0.449869010 0.464387659 0.473588192 0.478670606 0.479889895 0.486475670 0.498850926 0.502688867 0.513955129 0.516359088 0.543683899 0.566865199 0.567596212 0.586107827 0.591823652 0.605630258 0.643582846 0.645229458 0.667686884 0.675524967 0.686103265 0.701103266 0.703077471 0.704277350 0.706667793 0.717083646 0.731623422 0.736958512 0.737983150 0.747254040 0.750742362 0.771602802 0.775956900 0.808122903 0.821656256 0.823283571 0.828077704 0.833890020 0.846777922 0.847464113 0.850007389 0.854351965 0.862971455 0.867453442 0.875011750 0.881354484 0.887361447 0.889743360 0.892443479 0.900825964 0.909117575 0.915532748 0.917668391 0.924392573 0.931693642 0.934961578 0.954757891 0.956872963 0.964166843 0.969664069 0.975303349 0.982271258 0.998536836 1.004457715 1.014714343 1.020597904 1.040010171 1.055026480 1.069172689 1.070961404 1.078843568 1.087257142 1.103271889 1.110252808 1.111597790 1.118484190 1.122497395 1.123504404 1.140490345 1.148293921 1.161671654 1.169963353 1.176543485 1.186844779 1.200675020 1.220832397 1.231191411 1.257801721 1.296334153 1.296731851 1.314634657 1.326342713 1.326705715 1.329879288 1.330981544 1.334654246 1.341644212 1.348320412 1.364912753 1.379568244 1.381113332 1.381559690 1.426449512 1.509883049 1.557875473 1.684651316 1.918215829</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">173</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90970608" y3="-0.95579681" z3="-0.69115455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5856812" y3="-1.9532363" z3="-1.57048192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06944313" y3="-0.99861299" z3="-1.43007957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7655581" y3="1.47619052" z3="-1.07517027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2811267" y3="0.31081548" z3="-0.506323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64784705" y3="2.74086682" z3="-1.14436126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99995894" y3="2.7355204" z3="-0.85031315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38246572" y3="4.99688848" z3="-0.36163307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80556477" y3="3.85711763" z3="-0.87017158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7596593" y3="5.87350356" z3="-0.15764203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07538676" y3="1.61689928" z3="-1.66555999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12689793" y3="0.36031615" z3="0.22078367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70622709" y3="0.38783066" z3="-0.62551132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60924135" y3="0.73637266" z3="0.31163987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64873523" y3="-0.85184919" z3="-1.49010805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09533005" y3="-2.47513096" z3="-1.31237173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.07409517" y3="-5.49797244" z3="-6.25050374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79694257" y3="-5.06263033" z3="-5.28618636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07179777" y3="-3.91960981" z3="-2.83765972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76117848" y3="-3.68213629" z3="-5.14081725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49823501" y3="-5.88829134" z3="-4.19943332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15025267" y3="-5.31064315" z3="-2.9849643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40754012" y3="-3.07875928" z3="-3.92329128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00088949" y3="-3.01553782" z3="-5.97288281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55021313" y3="-6.97605756" z3="-4.2913328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95567213" y3="-5.94309929" z3="-2.11464445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65944703" y3="-3.37051454" z3="-1.59661744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34206945" y3="-3.85472779" z3="-0.85467766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68097683" y3="-4.85882054" z3="-1.12288425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38424805" y3="-3.54996371" z3="0.59294633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42176942" y3="-3.07094361" z3="3.35112352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69096372" y3="-4.5838822" z3="1.48644825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11632619" y3="-2.27232954" z3="1.09192281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13182564" y3="-2.0347849" z3="2.46211182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70102125" y3="-4.34640203" z3="2.85979263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88078216" y3="-5.59162775" z3="1.10765128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09264945" y3="-1.43370246" z3="0.42737678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0889794" y3="-1.02256033" z3="2.81742041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90534659" y3="-5.17019865" z3="3.54958835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42395787" y3="-2.88773559" z3="4.42960486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35996844" y3="-1.74307849" z3="-3.89632084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47838681" y3="-1.33447506" z3="-2.99300243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33377168" y3="3.72079871" z3="-1.01837589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.128231" y3="-2.996198" z3="-1.7184355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91857249" y3="-3.16591417" z3="-0.57727258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11409228" y3="-2.28481385" z3="0.348074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8384627" y3="-0.71679159" z3="0.59706845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.67719731" y3="-0.23358277" z3="-0.99815889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53111817" y3="0.44599202" z3="1.21035579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10365668" y3="-1.05418562" z3="1.93381949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4021362" y3="-4.37614723" z3="-0.33426126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12120322" y3="-4.60754689" z3="0.86784157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.96867869" y3="0.08334275" z3="-1.77927887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35227242" y3="0.62071097" z3="-0.80911348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.28642406" y3="-1.06359253" z3="-1.399916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63548698" y3="0.54977193" z3="0.5709085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18041063" y3="0.12798826" z3="2.20785444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99490349" y3="1.44409782" z3="1.31602252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56650755" y3="-0.10481448" z3="2.25967145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.9134426" y3="-1.71732564" z3="1.58226326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.63060079" y3="-1.51925052" z3="2.81677414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05642618" y3="-4.0245257" z3="0.88010668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51069059" y3="-4.348894" z3="1.74662438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35323948" y3="-5.68070731" z3="0.86797692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27545868" y3="-2.19686489" z3="-0.1750098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13695833" y3="-3.3007887" z3="-1.02937296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49726856" y3="-4.45970926" z3="-0.60591142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9998838" y3="-4.50949164" z3="0.69077113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14475107" y3="-3.44466697" z3="1.57579878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77626431" y3="-2.28871382" z3="1.1342266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49284074" y3="-3.23489163" z3="-2.06084601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35954515" y3="-5.30546867" z3="-1.28076594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26346236" y3="-5.69646971" z3="1.12667492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73813255" y3="-3.52095193" z3="2.58531635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86671341" y3="-1.43622552" z3="1.80947793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48731988" y3="4.02112605" z3="0.07712417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85927344" y3="3.81414438" z3="0.02138578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40761709" y3="3.30647121" z3="-1.15143148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6258285" y3="3.02964628" z3="-2.27054527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25403848" y3="3.23376271" z3="-2.1948438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03396888" y3="4.37582262" z3="1.00621808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50133956" y3="4.0192343" z3="0.8785477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84492695" y3="3.02717866" z3="-1.20215911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09358467" y3="2.6453068" z3="-3.17792773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37311094" y3="2.99203664" z3="-3.05389532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16971165" y3="-5.90272867" z3="2.315588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77007953" y3="-6.40248339" z3="0.26616865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33800577" y3="2.77512403" z3="-2.28025078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46365586" y3="3.04532457" z3="-0.15448273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6052222" y3="0.16046117" z3="-2.04861975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93212403" y3="1.40832175" z3="-1.9048523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77773516" y3="0.08714308" z3="-2.8504238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24987665" y3="1.19346225" z3="-3.51202016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29116886" y3="-0.87501208" z3="-2.94121074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.14901392" y3="1.12473618" z3="-4.1306121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4294629" y3="2.52805536" z3="-2.62890137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55662277" y3="2.42342832" z3="-3.40808728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89964097" y3="3.48084746" z3="-2.56822992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91742863" y3="3.29712554" z3="-3.95819684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5813913" y3="3.90395589" z3="-0.25611504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76652785" y3="5.05607249" z3="-0.05352851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93482403" y3="3.95438391" z3="0.18195508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45884925" y3="5.09787021" z3="0.735419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56203753" y3="3.06671888" z3="0.08140748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50147326" y3="5.1105632" z3="1.06541959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34131699" y3="6.2292223" z3="0.50891738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66007205" y3="6.25625402" z3="0.88926319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70636097" y3="7.1100193" z3="0.64472643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09076309" y3="7.16224737" z3="1.3245553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34050145" y3="-3.9519633" z3="-2.8759167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52566111" y3="-4.98496666" z3="-2.54316541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20882913" y3="-3.63141634" z3="-3.48174214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46173119" y3="-3.95244507" z3="-3.54034824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68937982" y3="-1.61079477" z3="-2.10858867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42381779" y3="-1.14037696" z3="-2.7869237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5280262" y3="-0.9439049" z3="-1.24655398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73773246" y3="-1.65668858" z3="-2.66238135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9097,-.9558,-.6912;6.5857,-1.9532,-1.5705;6.0694,-.9986,-1.4301;4.7656,1.4762,-1.0752;4.2811,.3108,-.5063;2.6478,2.7409,-1.1444;4,2.7355,-.8503;2.3825,4.9969,-.3616;1.8056,3.8571,-.8702;1.7597,5.8735,-.1576;2.0754,1.6169,-1.6656;3.1269,.3603,.2208;1.7062,.3878,-.6255;.6092,.7364,.3116;1.6487,-.8518,-1.4901;1.0953,-2.4751,-1.3124;2.0741,-5.498,-6.2505;1.7969,-5.0626,-5.2862;1.0718,-3.9196,-2.8377;1.7612,-3.6821,-5.1408;1.4982,-5.8883,-4.1994;1.1503,-5.3106,-2.985;1.4075,-3.0788,-3.9233;2.0009,-3.0155,-5.9729;1.5502,-6.9761,-4.2913;.9557,-5.9431,-2.1146;.6594,-3.3705,-1.5966;-.3421,-3.8547,-.8547;-.681,-4.8588,-1.1229;-.3842,-3.55,.5929;-.4218,-3.0709,3.3511;-.691,-4.5839,1.4864;-.1163,-2.2723,1.0919;-.1318,-2.0348,2.4621;-.701,-4.3464,2.8598;-.8808,-5.5916,1.1077;.0926,-1.4337,.4274;.089,-1.0226,2.8174;-.9053,-5.1702,3.5496;-.424,-2.8877,4.4296;1.36,-1.7431,-3.8963;1.4784,-1.3345,-2.993;.3338,3.7208,-1.0184;-2.1282,-2.9962,-1.7184;-2.9186,-3.1659,-.5773;-3.1141,-2.2848,.3481;-3.8385,-.7168,.5971;-4.6772,-.2336,-.9982;-2.5311,.446,1.2104;-5.1037,-1.0542,1.9338;-3.4021,-4.3761,-.3343;-4.1212,-4.6075,.8678;-3.9687,.0833,-1.7793;-5.3523,.6207,-.8091;-5.2864,-1.0636,-1.3999;-1.6355,.5498,.5709;-2.1804,.128,2.2079;-2.9949,1.4441,1.316;-5.5665,-.1048,2.2597;-5.9134,-1.7173,1.5823;-4.6306,-1.5193,2.8168;-5.0564,-4.0245,.8801;-3.5107,-4.3489,1.7466;-4.3532,-5.6807,.868;4.2755,-2.1969,-.175;4.137,-3.3008,-1.0294;3.4973,-4.4597,-.6059;2.9999,-4.5095,.6908;3.1448,-3.4447,1.5758;3.7763,-2.2887,1.1342;4.4928,-3.2349,-2.0608;3.3595,-5.3055,-1.2808;2.2635,-5.6965,1.1267;2.7381,-3.521,2.5853;3.8667,-1.4362,1.8095;-.4873,4.0211,.0771;-1.8593,3.8141,.0214;-2.4076,3.3065,-1.1514;-1.6258,3.0296,-2.2705;-.254,3.2338,-2.1948;-.034,4.3758,1.0062;-2.5013,4.0192,.8785;-3.8449,3.0272,-1.2022;-2.0936,2.6453,-3.1779;.3731,2.992,-3.0539;2.1697,-5.9027,2.3156;1.7701,-6.4025,.2662;-4.338,2.7751,-2.2803;-4.4637,3.0453,-.1545;6.6052,.1605,-2.0486;5.9321,1.4083,-1.9049;7.7777,.0871,-2.8504;8.2499,1.1935,-3.512;8.2912,-.875,-2.9412;9.149,1.1247,-4.1306;6.4295,2.5281,-2.6289;7.5566,2.4234,-3.4081;5.8996,3.4808,-2.5682;7.9174,3.2971,-3.9582;4.5814,3.904,-.2561;3.7665,5.0561,-.0535;5.9348,3.9544,.182;6.4588,5.0979,.7354;6.562,3.0667,.0814;7.5015,5.1106,1.0654;4.3413,6.2292,.5089;5.6601,6.2563,.8893;3.7064,7.11,.6447;6.0908,7.1622,1.3246;-2.3405,-3.952,-2.8759;-2.5257,-4.985,-2.5432;-3.2088,-3.6314,-3.4817;-1.4617,-3.9524,-3.5403;-1.6894,-1.6108,-2.1086;-2.4238,-1.1404,-2.7869;-1.528,-.9439,-1.2466;-.7377,-1.6567,-2.6624;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662917317552</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002090409922 0.000281917762 0.017050638330 0.005335268220</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056887987 -0.000537303 0.000194952 0.000340344 0.000375461 0.000392362 0.000476759 0.000517584 0.000623113 0.000697758 0.000814194 0.000901167 0.001072565 0.001141876 0.001286385 0.001341582 0.001389748 0.001528186 0.001923582 0.002088972 0.002303494 0.002491589 0.002654859 0.003160749 0.003440617 0.003776806 0.004162158 0.004386115 0.004630490 0.004721867 0.005023999 0.005199749 0.005934915 0.006030992 0.006672800 0.006821628 0.007069932 0.007316003 0.008124003 0.008345943 0.008832846 0.009205640 0.009697033 0.010043567 0.010933107 0.011237925 0.011351669 0.012099100 0.013190144 0.013433195 0.013850834 0.014556967 0.014884041 0.015453948 0.015743307 0.016523704 0.016854865 0.017872639 0.018490151 0.019205720 0.019892856 0.020268138 0.021038712 0.021614577 0.022112182 0.022689072 0.023350295 0.023601056 0.024487779 0.025826239 0.026339178 0.026577888 0.027021103 0.027204201 0.028098607 0.028888413 0.030779584 0.031410307 0.032647787 0.033791017 0.034346613 0.035732128 0.038875481 0.039188724 0.041852224 0.045353557 0.045513269 0.045884912 0.048541997 0.049473020 0.049729412 0.050189669 0.051526841 0.052034064 0.052283372 0.052382866 0.052604503 0.053337941 0.054651802 0.055545318 0.056312825 0.056542162 0.056648836 0.056967304 0.057578243 0.058402731 0.059175243 0.059600679 0.060779638 0.061956880 0.062497562 0.064184279 0.064368647 0.064855283 0.065698281 0.067126045 0.067771527 0.068840486 0.070396583 0.071779365 0.072099815 0.072513930 0.072888870 0.075286146 0.078364988 0.080630675 0.081421068 0.083148612 0.083355801 0.086463683 0.088550295 0.089298542 0.089773842 0.091268001 0.093217943 0.094489878 0.095441055 0.096147761 0.096793791 0.098111218 0.100002221 0.100412268 0.102440174 0.103358908 0.103941263 0.106143097 0.108439596 0.110524781 0.111841668 0.112184031 0.113254032 0.114300451 0.116146069 0.116768675 0.117557327 0.118474580 0.120233513 0.121788681 0.124439514 0.125426698 0.128372162 0.128810778 0.130315212 0.133415451 0.136014662 0.137538994 0.138414810 0.138577797 0.139820676 0.141677450 0.143473235 0.145562259 0.146225184 0.151648402 0.153231283 0.153365249 0.159959003 0.160845554 0.168419563 0.171304355 0.175784648 0.178754497 0.181300836 0.183872084 0.188801236 0.189266438 0.191560391 0.200766009 0.202116408 0.206147017 0.206877083 0.207209589 0.211523592 0.212121090 0.212558577 0.213446343 0.216503619 0.218247617 0.220571533 0.224057593 0.225401653 0.231800319 0.234520478 0.235252316 0.238328941 0.245231615 0.247273446 0.251172387 0.256460691 0.257160759 0.258024141 0.262265989 0.271535128 0.282674309 0.291770971 0.299576016 0.299904758 0.300919233 0.307007750 0.307739991 0.309611966 0.318895758 0.321246707 0.326271762 0.329646235 0.335266254 0.347605352 0.351954660 0.355578666 0.359583985 0.361095166 0.364062632 0.384242965 0.406721724 0.411806624 0.430168395 0.431866695 0.434839684 0.449983444 0.464388561 0.473588876 0.478671731 0.479966574 0.486481005 0.498852664 0.502690057 0.513959479 0.516373714 0.543684773 0.566868092 0.567603676 0.586119719 0.591827909 0.605631174 0.643590431 0.645231603 0.667699632 0.675532054 0.686103437 0.701109246 0.703118702 0.704283977 0.706836366 0.717083619 0.731679204 0.736979799 0.737984792 0.747255613 0.750742504 0.771602814 0.775957152 0.808165057 0.821656367 0.823387587 0.828079932 0.833890646 0.846791266 0.847464189 0.850018965 0.854361643 0.863047244 0.867453474 0.875014713 0.881364261 0.887376933 0.889744881 0.892446179 0.900826091 0.909141197 0.915543414 0.917668438 0.924392572 0.931697447 0.934969903 0.954777160 0.956874534 0.964393169 0.969681038 0.975302983 0.982277028 0.998536902 1.004478457 1.014723043 1.020666198 1.040011217 1.055026486 1.069194055 1.070968733 1.078921965 1.087258890 1.103271828 1.110253030 1.111598809 1.118485878 1.122497395 1.123504469 1.140881619 1.148293913 1.161676239 1.169965353 1.176545787 1.186884659 1.200675102 1.220845997 1.231198540 1.257804512 1.296339644 1.296792647 1.314635127 1.326342601 1.326710740 1.329880516 1.331000059 1.334655682 1.341666938 1.348326497 1.364913057 1.379610257 1.381126670 1.381560570 1.426452409 1.509879642 1.557876197 1.684653252 1.918221450</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">174</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9088888" y3="-0.95545984" z3="-0.69140891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.582978" y3="-1.95367136" z3="-1.57341232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06693232" y3="-0.99895958" z3="-1.43300588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76374926" y3="1.47608142" z3="-1.07831483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28051168" y3="0.31137824" z3="-0.50704678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64629695" y3="2.74174952" z3="-1.14245114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99922406" y3="2.73589581" z3="-0.85229515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38356583" y3="4.99795638" z3="-0.35816047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80512659" y3="3.85833389" z3="-0.86534338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76146843" y3="5.87464094" z3="-0.15227607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07180754" y3="1.6180558" z3="-1.66210934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12780385" y3="0.36207261" z3="0.22228419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70540971" y3="0.38899986" z3="-0.62105736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61025512" y3="0.73699498" z3="0.31842338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64661646" y3="-0.85087751" z3="-1.48533081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09612168" y3="-2.47434824" z3="-1.31018425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.08815676" y3="-5.4978273" z3="-6.24519796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.80829076" y3="-5.06257041" z3="-5.28156037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07652842" y3="-3.91990158" z3="-2.8348483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77150385" y3="-3.68196329" z3="-5.13625747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50702073" y3="-5.88843399" z3="-4.195629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15577753" y3="-5.31098426" z3="-2.98191807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41434715" y3="-3.07875546" z3="-3.91963097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01303199" y3="-3.01524595" z3="-5.96775879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55953578" y3="-6.97623156" z3="-4.28747963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9593182" y3="-5.94365224" z3="-2.11212181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66172517" y3="-3.37046407" z3="-1.5948965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3393619" y3="-3.85754023" z3="-0.85289742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67778639" y3="-4.861293" z3="-1.12244126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38407066" y3="-3.55294925" z3="0.59453862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43165762" y3="-3.07133573" z3="3.35127591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69490663" y3="-4.58624447" z3="1.48663787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11707113" y3="-2.27404403" z3="1.09386273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13716173" y3="-2.0356844" z3="2.46361603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71007147" y3="-4.34752709" z3="2.85961943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88165135" y3="-5.59656319" z3="1.10848247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09461154" y3="-1.43593878" z3="0.42876421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08889259" y3="-1.02944839" z3="2.82220804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91919722" y3="-5.17019684" z3="3.54764431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43604872" y3="-2.88850215" z3="4.42977451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36542863" y3="-1.74301167" z3="-3.8923498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48228336" y3="-1.33448876" z3="-2.98930907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33300251" y3="3.72242799" z3="-1.01011565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1253544" y3="-2.9983955" z3="-1.7186327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91773991" y3="-3.16863837" z3="-0.57983313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1153874" y3="-2.28733268" z3="0.34518781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83825245" y3="-0.71732851" z3="0.59135898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66967472" y3="-0.23293102" z3="-1.0072886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53209983" y3="0.44232156" z3="1.2128492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11088707" y3="-1.0538982" z3="1.92194607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40323987" y3="-4.37753391" z3="-0.33970884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12550821" y3="-4.60868091" z3="0.86014273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.95713872" y3="0.08673163" z3="-1.78389402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34917204" y3="0.61836726" z3="-0.81926849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.27277367" y3="-1.06453029" z3="-1.41468972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6337368" y3="0.54770564" z3="0.57671341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18493942" y3="0.12092343" z3="2.21033902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99563245" y3="1.44058184" z3="1.32026002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57214004" y3="-0.10414118" z3="2.24705469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92142949" y3="-1.71412493" z3="1.56521262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.64359806" y3="-1.52268449" z3="2.80635521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06155409" y3="-4.02623184" z3="0.86875477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.517892" y3="-4.34847209" z3="1.74083643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35633822" y3="-5.68255144" z3="0.86059663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27571277" y3="-2.1962701" z3="-0.17299447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13615302" y3="-3.30035677" z3="-1.02611244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49597178" y3="-4.45828369" z3="-0.60136459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99824043" y3="-4.50650073" z3="0.69517231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14497224" y3="-3.44214011" z3="1.57923502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77772125" y3="-2.28758692" z3="1.13666512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49201797" y3="-3.23568996" z3="-2.05760476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35767471" y3="-5.30390119" z3="-1.27530178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26201301" y3="-5.69343673" z3="1.13287999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73867255" y3="-3.51748134" z3="2.58890321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87081827" y3="-1.43672346" z3="1.81210787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48555657" y3="4.01941186" z3="0.08750186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85794157" y3="3.81386343" z3="0.03363008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40945255" y3="3.31168739" z3="-1.14010713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62991911" y3="3.03776888" z3="-2.26088836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25764363" y3="3.23987472" z3="-2.18696893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0302599" y3="4.37092127" z3="1.01632371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49761175" y3="4.01557947" z3="0.8937501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84709221" y3="3.03410423" z3="-1.18877648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09983775" y3="2.65744457" z3="-3.16862692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36714408" y3="3.00186396" z3="-3.0500089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16670655" y3="-5.89709455" z3="2.32226144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77097549" y3="-6.40263547" z3="0.27349867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34315538" y3="2.79017872" z3="-2.26773976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46316392" y3="3.04552713" z3="-0.13927143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60105958" y3="0.1592762" z3="-2.05448971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92827474" y3="1.40726067" z3="-1.91065976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77152494" y3="0.08495578" z3="-2.85921127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24192801" y3="1.19045822" z3="-3.52336196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28472882" y3="-0.8773238" z3="-2.95015406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.13945859" y3="1.1209459" z3="-4.1442138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42380232" y3="2.52618942" z3="-2.6371367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5489743" y3="2.42061243" z3="-3.41904817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89416317" y3="3.47910508" z3="-2.57601819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90840795" y3="3.29367284" z3="-3.9710328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58266266" y3="3.904317" z3="-0.25993517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76861242" y3="5.05679984" z3="-0.05443415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93758181" y3="3.95432983" z3="0.17368623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46366722" y3="5.09774963" z3="0.72549567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56439942" y3="3.06633771" z3="0.0707393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50744961" y3="5.11006398" z3="1.05197937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34544277" y3="6.22987983" z3="0.50634706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6654974" y3="6.25652298" z3="0.88229528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71106869" y3="7.11106296" z3="0.64467147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09779558" y3="7.16249887" z3="1.31621337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33523742" y3="-3.95259891" z3="-2.87695317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51869663" y3="-4.98615018" z3="-2.54700925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20471784" y3="-3.6335228" z3="-3.4827576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45589464" y3="-3.94951825" z3="-3.54033112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68707089" y3="-1.61236107" z3="-2.10676375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42239837" y3="-1.14267706" z3="-2.78505188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52535463" y3="-0.94649188" z3="-1.24488326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73636363" y3="-1.65648212" z3="-2.6607997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9089,-.9555,-.6914;6.583,-1.9537,-1.5734;6.0669,-.999,-1.433;4.7637,1.4761,-1.0783;4.2805,.3114,-.507;2.6463,2.7417,-1.1425;3.9992,2.7359,-.8523;2.3836,4.998,-.3582;1.8051,3.8583,-.8653;1.7615,5.8746,-.1523;2.0718,1.6181,-1.6621;3.1278,.3621,.2223;1.7054,.389,-.6211;.6103,.737,.3184;1.6466,-.8509,-1.4853;1.0961,-2.4743,-1.3102;2.0882,-5.4978,-6.2452;1.8083,-5.0626,-5.2816;1.0765,-3.9199,-2.8348;1.7715,-3.682,-5.1363;1.507,-5.8884,-4.1956;1.1558,-5.311,-2.9819;1.4143,-3.0788,-3.9196;2.013,-3.0152,-5.9678;1.5595,-6.9762,-4.2875;.9593,-5.9437,-2.1121;.6617,-3.3705,-1.5949;-.3394,-3.8575,-.8529;-.6778,-4.8613,-1.1224;-.3841,-3.5529,.5945;-.4317,-3.0713,3.3513;-.6949,-4.5862,1.4866;-.1171,-2.274,1.0939;-.1372,-2.0357,2.4636;-.7101,-4.3475,2.8596;-.8817,-5.5966,1.1085;.0946,-1.4359,.4288;.0889,-1.0294,2.8222;-.9192,-5.1702,3.5476;-.436,-2.8885,4.4298;1.3654,-1.743,-3.8923;1.4823,-1.3345,-2.9893;.333,3.7224,-1.0101;-2.1254,-2.9984,-1.7186;-2.9177,-3.1686,-.5798;-3.1154,-2.2873,.3452;-3.8383,-.7173,.5914;-4.6697,-.2329,-1.0073;-2.5321,.4423,1.2128;-5.1109,-1.0539,1.9219;-3.4032,-4.3775,-.3397;-4.1255,-4.6087,.8601;-3.9571,.0867,-1.7839;-5.3492,.6184,-.8193;-5.2728,-1.0645,-1.4147;-1.6337,.5477,.5767;-2.1849,.1209,2.2103;-2.9956,1.4406,1.3203;-5.5721,-.1041,2.2471;-5.9214,-1.7141,1.5652;-4.6436,-1.5227,2.8064;-5.0616,-4.0262,.8688;-3.5179,-4.3485,1.7408;-4.3563,-5.6826,.8606;4.2757,-2.1963,-.173;4.1362,-3.3004,-1.0261;3.496,-4.4583,-.6014;2.9982,-4.5065,.6952;3.145,-3.4421,1.5792;3.7777,-2.2876,1.1367;4.492,-3.2357,-2.0576;3.3577,-5.3039,-1.2753;2.262,-5.6934,1.1329;2.7387,-3.5175,2.5889;3.8708,-1.4367,1.8121;-.4856,4.0194,.0875;-1.8579,3.8139,.0336;-2.4095,3.3117,-1.1401;-1.6299,3.0378,-2.2609;-.2576,3.2399,-2.187;-.0303,4.3709,1.0163;-2.4976,4.0156,.8938;-3.8471,3.0341,-1.1888;-2.0998,2.6574,-3.1686;.3671,3.0019,-3.05;2.1667,-5.8971,2.3223;1.771,-6.4026,.2735;-4.3432,2.7902,-2.2677;-4.4632,3.0455,-.1393;6.6011,.1593,-2.0545;5.9283,1.4073,-1.9107;7.7715,.085,-2.8592;8.2419,1.1905,-3.5234;8.2847,-.8773,-2.9502;9.1395,1.1209,-4.1442;6.4238,2.5262,-2.6371;7.549,2.4206,-3.419;5.8942,3.4791,-2.576;7.9084,3.2937,-3.971;4.5827,3.9043,-.2599;3.7686,5.0568,-.0544;5.9376,3.9543,.1737;6.4637,5.0977,.7255;6.5644,3.0663,.0707;7.5074,5.1101,1.052;4.3454,6.2299,.5063;5.6655,6.2565,.8823;3.7111,7.1111,.6447;6.0978,7.1625,1.3162;-2.3352,-3.9526,-2.877;-2.5187,-4.9862,-2.547;-3.2047,-3.6335,-3.4828;-1.4559,-3.9495,-3.5403;-1.6871,-1.6124,-2.1068;-2.4224,-1.1427,-2.7851;-1.5254,-.9465,-1.2449;-.7364,-1.6565,-2.6608;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662912575463</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001774320962 0.000280908410 0.017167277350 0.005345255619</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056889056 -0.000539097 0.000195728 0.000339829 0.000375576 0.000393630 0.000478265 0.000517423 0.000623107 0.000697597 0.000814218 0.000902017 0.001075037 0.001141910 0.001286443 0.001344307 0.001389664 0.001529171 0.001925805 0.002163638 0.002306059 0.002495947 0.002667842 0.003171002 0.003441257 0.003776942 0.004165845 0.004386086 0.004630681 0.004722245 0.005029174 0.005199636 0.005955006 0.006038675 0.006675462 0.006823752 0.007071397 0.007317154 0.008124388 0.008348751 0.008838200 0.009213101 0.009702214 0.010071217 0.010934512 0.011238132 0.011355012 0.012130877 0.013194461 0.013442906 0.013853406 0.014558132 0.014887092 0.015456737 0.015743218 0.016526688 0.016867226 0.017914752 0.018504417 0.019246465 0.019922746 0.020273589 0.021039495 0.021643657 0.022115754 0.022689235 0.023350322 0.023616760 0.024487840 0.025826254 0.026339079 0.026578751 0.027021445 0.027207542 0.028099614 0.028901407 0.030784751 0.031410401 0.032647910 0.033802759 0.034349499 0.035743591 0.038881903 0.039192589 0.041859420 0.045354581 0.045516509 0.045883306 0.048543974 0.049481203 0.049731257 0.050216493 0.051526841 0.052036909 0.052283395 0.052382872 0.052626511 0.053337857 0.054660756 0.055557160 0.056313498 0.056544254 0.056649133 0.056967355 0.057578239 0.058412194 0.059177155 0.059602643 0.060780422 0.061957095 0.062499678 0.064184834 0.064394564 0.064867045 0.065715240 0.067137455 0.067781316 0.068842426 0.070412107 0.071781079 0.072101875 0.072514752 0.072889046 0.075286548 0.078395285 0.080630978 0.081438100 0.083149073 0.083358335 0.086480826 0.088557135 0.089300765 0.089775869 0.091269559 0.093218309 0.094491198 0.095442233 0.096147725 0.096795255 0.098113050 0.100004026 0.100421088 0.102440398 0.103375143 0.103985235 0.106144359 0.108458791 0.110526988 0.111843532 0.112185688 0.113256224 0.114304768 0.116185934 0.116775328 0.117557291 0.118474205 0.120247218 0.121793098 0.124444274 0.125432180 0.128376071 0.128813828 0.130316097 0.133415418 0.136014596 0.137556421 0.138439048 0.138588267 0.139820468 0.141678699 0.143473359 0.145563580 0.146236199 0.151652478 0.153230962 0.153377647 0.159959484 0.160848601 0.168420747 0.171304314 0.175809426 0.178754661 0.181313529 0.183872457 0.188803315 0.189292866 0.191566825 0.200769197 0.202119848 0.206180696 0.206879295 0.207209604 0.211602367 0.212166600 0.212560743 0.213446538 0.216510838 0.218249134 0.220571578 0.224079403 0.225402391 0.231801545 0.234524771 0.235299596 0.238329214 0.245232849 0.247277947 0.251179919 0.256461299 0.257160742 0.258025838 0.262272645 0.271535162 0.282674303 0.291777450 0.299579305 0.299905230 0.300921969 0.307008118 0.307741663 0.309612344 0.318895694 0.321254061 0.326271825 0.329648330 0.335266243 0.347605952 0.351955785 0.355579054 0.359597422 0.361185668 0.364065509 0.384267664 0.406721623 0.411811296 0.430168887 0.431870002 0.434848525 0.450059534 0.464389092 0.473589596 0.478678678 0.480035545 0.486482858 0.498853393 0.502690041 0.513966783 0.516376789 0.543685061 0.566875156 0.567613569 0.586126140 0.591827663 0.605631216 0.643614567 0.645238572 0.667703388 0.675536474 0.686107876 0.701150542 0.703155602 0.704290822 0.706908769 0.717084170 0.731729491 0.737025421 0.737988072 0.747269349 0.750742624 0.771602813 0.775957197 0.808214660 0.821656661 0.823453492 0.828079905 0.833890679 0.846807158 0.847467295 0.850025955 0.854384897 0.863093592 0.867453735 0.875022452 0.881425750 0.887398104 0.889752051 0.892454381 0.900827872 0.909164024 0.915550207 0.917668237 0.924392588 0.931700281 0.934980075 0.954787691 0.956876954 0.964563333 0.969686613 0.975331707 0.982292290 0.998536960 1.004492134 1.014737838 1.020749407 1.040011556 1.055026521 1.069206048 1.071012903 1.078992457 1.087264718 1.103273049 1.110253481 1.111599221 1.118485931 1.122497485 1.123505200 1.141157716 1.148297626 1.161678663 1.169967143 1.176546016 1.186911898 1.200676288 1.220846054 1.231201521 1.257809476 1.296344497 1.296827394 1.314636009 1.326342512 1.326710838 1.329885207 1.331012154 1.334656469 1.341695650 1.348330136 1.364931843 1.379639453 1.381134981 1.381561626 1.426470983 1.509948627 1.557877923 1.684654959 1.918231433</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">175</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90732429" y3="-0.95520694" z3="-0.69240318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57973235" y3="-1.9540106" z3="-1.57700453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06378326" y3="-0.99927474" z3="-1.43642445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76142566" y3="1.47608188" z3="-1.08065438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27941566" y3="0.31178033" z3="-0.50756483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64417227" y3="2.74244858" z3="-1.13941639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9978997" y3="2.73615923" z3="-0.8529622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3846462" y3="4.99869034" z3="-0.35531583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80446017" y3="3.85934161" z3="-0.86082951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76343968" y3="5.87552298" z3="-0.14805633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06752102" y3="1.61915178" z3="-1.65744962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12829991" y3="0.36289563" z3="0.22429857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7041489" y3="0.38927806" z3="-0.61621493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61059031" y3="0.73565252" z3="0.32572784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64437269" y3="-0.85009088" z3="-1.48121088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09728607" y3="-2.47565127" z3="-1.30568007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.10219757" y3="-5.49817399" z3="-6.23869545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8197447" y3="-5.06305279" z3="-5.27580206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08155767" y3="-3.92047826" z3="-2.83082343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.78199088" y3="-3.68259118" z3="-5.13066379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.51622568" y3="-5.8889537" z3="-4.19051984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16176451" y3="-5.31150398" z3="-2.9778216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42180274" y3="-3.07940096" z3="-3.9149039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02526394" y3="-3.01577626" z3="-5.96153757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56961114" y3="-6.97670778" z3="-4.28208776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96367827" y3="-5.94415148" z3="-2.10838749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66394484" y3="-3.37179174" z3="-1.59137235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3392918" y3="-3.8574831" z3="-0.85269126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67640548" y3="-4.86185335" z3="-1.12247153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38698718" y3="-3.5533236" z3="0.59489252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43680561" y3="-3.0757636" z3="3.35287446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69917453" y3="-4.58759775" z3="1.48640174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11936127" y3="-2.27601622" z3="1.09574544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14138724" y3="-2.03911468" z3="2.46580532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71548441" y3="-4.35083479" z3="2.85965655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88902447" y3="-5.59449248" z3="1.10590469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09434491" y3="-1.43729117" z3="0.43257968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08017926" y3="-1.02862028" z3="2.82334323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92414303" y3="-5.1748455" z3="3.54801714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44371941" y3="-2.8932459" z3="4.43140183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37328918" y3="-1.74377813" z3="-3.88869697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48406477" y3="-1.33427108" z3="-2.98449851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33194297" y3="3.72430239" z3="-1.00297794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12344323" y3="-2.99942949" z3="-1.72266533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91838169" y3="-3.16832912" z3="-0.58469199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11801728" y3="-2.28630069" z3="0.33909319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83945813" y3="-0.71750462" z3="0.58704549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66279693" y3="-0.22429531" z3="-1.01336046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53241164" y3="0.43724659" z3="1.21615496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11808596" y3="-1.055854" z3="1.91028402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40336435" y3="-4.37837301" z3="-0.34345496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12819665" y3="-4.60917081" z3="0.85519518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.94778779" y3="0.1038989" z3="-1.783877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34465394" y3="0.62462078" z3="-0.82453807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.2638767" y3="-1.0535124" z3="-1.42879808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63315194" y3="0.54314513" z3="0.58261632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18924744" y3="0.11072351" z3="2.2134085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99373009" y3="1.43597903" z3="1.32577484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.58176025" y3="-0.10579256" z3="2.23390096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92610967" y3="-1.715494" z3="1.54888515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.65514046" y3="-1.52439409" z3="2.79643223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06345122" y3="-4.02585086" z3="0.86279414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52165715" y3="-4.35049887" z3="1.73669681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36061477" y3="-5.68217565" z3="0.85444129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27523328" y3="-2.19552368" z3="-0.17172552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13659478" y3="-3.30150858" z3="-1.02299055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49744991" y3="-4.45943622" z3="-0.59615068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00004619" y3="-4.50616401" z3="0.70055041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14563622" y3="-3.43943508" z3="1.58286071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77732644" y3="-2.28471965" z3="1.13821093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49145034" y3="-3.23798007" z3="-2.05488891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35928456" y3="-5.30622029" z3="-1.26887894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26213939" y3="-5.69127708" z3="1.13893306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73910469" y3="-3.51308326" z3="2.59259287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86825423" y3="-1.43077277" z3="1.81150608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48407635" y3="4.01667608" z3="0.09842804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8565847" y3="3.81198826" z3="0.04639964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41039522" y3="3.31541572" z3="-1.12857772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63343382" y3="3.0459586" z3="-2.25282238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26094873" y3="3.2466999" z3="-2.1807021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02604283" y3="4.36310431" z3="1.02845451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49502517" y3="4.01118662" z3="0.90723622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84840185" y3="3.03948915" z3="-1.17629774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10558204" y3="2.67011324" z3="-3.16142899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36307745" y3="3.00985004" z3="-3.04362933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16599387" y3="-5.89369992" z3="2.32829628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76990149" y3="-6.39960284" z3="0.27969015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3467166" y3="2.80260247" z3="-2.25541674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46247723" y3="3.04493977" z3="-0.12597031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59625998" y3="0.15840259" z3="-2.0603628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92378175" y3="1.40650655" z3="-1.91604659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76455764" y3="0.08330655" z3="-2.86815161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23300903" y3="1.18809077" z3="-3.53491228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27757466" y3="-0.87902567" z3="-2.9594329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.12879204" y3="1.11795" z3="-4.158206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41723813" y3="2.52464225" z3="-2.64519153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54022624" y3="2.41826121" z3="-3.43015263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88762531" y3="3.47750669" z3="-2.58383678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.89802368" y3="3.29066915" z3="-3.98426244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58350346" y3="3.90448359" z3="-0.26259421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77053099" y3="5.05709047" z3="-0.0552752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93965464" y3="3.95432831" z3="0.16710088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4677032" y3="5.09772013" z3="0.71693175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56582516" y3="3.06634479" z3="0.06306897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51240316" y3="5.10994384" z3="1.04033898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34936662" y3="6.23005417" z3="0.50340554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67048068" y3="6.25655054" z3="0.8754718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71571746" y3="7.11121746" z3="0.64294795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10431704" y3="7.16246449" z3="1.30782722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33138277" y3="-3.95615051" z3="-2.88053753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51691517" y3="-4.98926303" z3="-2.54742731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19774682" y3="-3.63644469" z3="-3.48969082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45031113" y3="-3.95656106" z3="-3.54193575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68238813" y3="-1.61429999" z3="-2.11223474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41428847" y3="-1.14246223" z3="-2.79247673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52274876" y3="-0.94799631" z3="-1.24932138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72895409" y3="-1.66185996" z3="-2.66360976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9073,-.9552,-.6924;6.5797,-1.954,-1.577;6.0638,-.9993,-1.4364;4.7614,1.4761,-1.0807;4.2794,.3118,-.5076;2.6442,2.7424,-1.1394;3.9979,2.7362,-.853;2.3846,4.9987,-.3553;1.8045,3.8593,-.8608;1.7634,5.8755,-.1481;2.0675,1.6192,-1.6574;3.1283,.3629,.2243;1.7041,.3893,-.6162;.6106,.7357,.3257;1.6444,-.8501,-1.4812;1.0973,-2.4757,-1.3057;2.1022,-5.4982,-6.2387;1.8197,-5.0631,-5.2758;1.0816,-3.9205,-2.8308;1.782,-3.6826,-5.1307;1.5162,-5.889,-4.1905;1.1618,-5.3115,-2.9778;1.4218,-3.0794,-3.9149;2.0253,-3.0158,-5.9615;1.5696,-6.9767,-4.2821;.9637,-5.9442,-2.1084;.6639,-3.3718,-1.5914;-.3393,-3.8575,-.8527;-.6764,-4.8619,-1.1225;-.387,-3.5533,.5949;-.4368,-3.0758,3.3529;-.6992,-4.5876,1.4864;-.1194,-2.276,1.0957;-.1414,-2.0391,2.4658;-.7155,-4.3508,2.8597;-.889,-5.5945,1.1059;.0943,-1.4373,.4326;.0802,-1.0286,2.8233;-.9241,-5.1748,3.548;-.4437,-2.8932,4.4314;1.3733,-1.7438,-3.8887;1.4841,-1.3343,-2.9845;.3319,3.7243,-1.003;-2.1234,-2.9994,-1.7227;-2.9184,-3.1683,-.5847;-3.118,-2.2863,.3391;-3.8395,-.7175,.587;-4.6628,-.2243,-1.0134;-2.5324,.4372,1.2162;-5.1181,-1.0559,1.9103;-3.4034,-4.3784,-.3435;-4.1282,-4.6092,.8552;-3.9478,.1039,-1.7839;-5.3447,.6246,-.8245;-5.2639,-1.0535,-1.4288;-1.6332,.5431,.5826;-2.1892,.1107,2.2134;-2.9937,1.436,1.3258;-5.5818,-.1058,2.2339;-5.9261,-1.7155,1.5489;-4.6551,-1.5244,2.7964;-5.0635,-4.0259,.8628;-3.5217,-4.3505,1.7367;-4.3606,-5.6822,.8544;4.2752,-2.1955,-.1717;4.1366,-3.3015,-1.023;3.4974,-4.4594,-.5962;3,-4.5062,.7006;3.1456,-3.4394,1.5829;3.7773,-2.2847,1.1382;4.4915,-3.238,-2.0549;3.3593,-5.3062,-1.2689;2.2621,-5.6913,1.1389;2.7391,-3.5131,2.5926;3.8683,-1.4308,1.8115;-.4841,4.0167,.0984;-1.8566,3.812,.0464;-2.4104,3.3154,-1.1286;-1.6334,3.046,-2.2528;-.2609,3.2467,-2.1807;-.026,4.3631,1.0285;-2.495,4.0112,.9072;-3.8484,3.0395,-1.1763;-2.1056,2.6701,-3.1614;.3631,3.0099,-3.0436;2.166,-5.8937,2.3283;1.7699,-6.3996,.2797;-4.3467,2.8026,-2.2554;-4.4625,3.0449,-.126;6.5963,.1584,-2.0604;5.9238,1.4065,-1.916;7.7646,.0833,-2.8682;8.233,1.1881,-3.5349;8.2776,-.879,-2.9594;9.1288,1.1179,-4.1582;6.4172,2.5246,-2.6452;7.5402,2.4183,-3.4302;5.8876,3.4775,-2.5838;7.898,3.2907,-3.9843;4.5835,3.9045,-.2626;3.7705,5.0571,-.0553;5.9397,3.9543,.1671;6.4677,5.0977,.7169;6.5658,3.0663,.0631;7.5124,5.1099,1.0403;4.3494,6.2301,.5034;5.6705,6.2566,.8755;3.7157,7.1112,.6429;6.1043,7.1625,1.3078;-2.3314,-3.9562,-2.8805;-2.5169,-4.9893,-2.5474;-3.1977,-3.6364,-3.4897;-1.4503,-3.9566,-3.5419;-1.6824,-1.6143,-2.1122;-2.4143,-1.1425,-2.7925;-1.5227,-.948,-1.2493;-.729,-1.6619,-2.6636;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662906936011</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001469297167 0.000265671076 0.017110323792 0.005342967699</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056889255 -0.000544270 0.000196249 0.000340096 0.000376308 0.000393734 0.000478708 0.000517770 0.000623562 0.000698629 0.000815108 0.000904435 0.001077117 0.001142209 0.001287003 0.001345746 0.001389984 0.001529535 0.001929376 0.002199470 0.002309454 0.002508487 0.002683698 0.003185072 0.003442046 0.003777547 0.004179533 0.004386221 0.004630902 0.004728868 0.005034104 0.005199769 0.005981645 0.006062408 0.006677303 0.006824475 0.007072569 0.007319803 0.008124700 0.008352305 0.008840719 0.009236297 0.009703353 0.010121379 0.010935185 0.011237944 0.011357774 0.012167895 0.013197972 0.013453433 0.013854355 0.014558438 0.014886943 0.015458273 0.015743293 0.016531934 0.016898801 0.017934971 0.018513355 0.019282998 0.019974319 0.020277338 0.021039333 0.021677193 0.022118418 0.022689427 0.023350254 0.023641916 0.024487949 0.025826638 0.026340366 0.026581494 0.027021397 0.027213783 0.028102344 0.028910495 0.030793571 0.031410567 0.032647478 0.033807483 0.034356795 0.035757420 0.038882770 0.039194849 0.041866783 0.045357064 0.045523115 0.045883255 0.048545015 0.049486937 0.049732489 0.050250890 0.051526896 0.052039646 0.052283420 0.052382870 0.052645116 0.053338431 0.054661835 0.055573482 0.056313402 0.056543164 0.056649055 0.056967455 0.057578229 0.058420245 0.059180124 0.059607682 0.060780439 0.061957243 0.062501552 0.064185717 0.064419999 0.064880402 0.065739953 0.067144725 0.067788787 0.068845407 0.070421955 0.071783280 0.072101884 0.072515586 0.072889081 0.075286824 0.078420929 0.080630935 0.081451853 0.083149486 0.083362566 0.086501311 0.088563946 0.089305170 0.089778142 0.091270984 0.093219181 0.094491739 0.095443335 0.096147744 0.096796586 0.098113049 0.100005597 0.100421769 0.102442565 0.103386152 0.104018447 0.106144638 0.108465354 0.110527266 0.111851462 0.112185649 0.113256424 0.114310587 0.116257761 0.116780369 0.117563313 0.118474003 0.120251463 0.121796012 0.124453045 0.125438035 0.128382600 0.128819930 0.130320758 0.133415919 0.136015008 0.137580340 0.138460928 0.138622565 0.139820223 0.141680478 0.143473602 0.145566115 0.146239070 0.151656730 0.153232234 0.153391961 0.159963469 0.160849353 0.168427051 0.171304299 0.175821664 0.178755032 0.181319153 0.183873071 0.188803825 0.189320410 0.191573324 0.200770431 0.202121306 0.206207842 0.206881335 0.207209911 0.211658093 0.212207630 0.212561318 0.213446513 0.216517868 0.218253911 0.220571761 0.224111297 0.225403100 0.231802652 0.234526410 0.235317420 0.238329445 0.245231762 0.247278178 0.251185531 0.256461470 0.257161195 0.258026106 0.262279326 0.271535163 0.282674333 0.291783192 0.299588503 0.299905979 0.300927734 0.307008612 0.307742526 0.309612414 0.318895546 0.321260071 0.326271901 0.329663047 0.335266260 0.347607007 0.351957946 0.355579133 0.359643818 0.361264297 0.364067662 0.384283630 0.406721679 0.411838421 0.430168836 0.431872900 0.434885204 0.450111435 0.464389025 0.473591761 0.478692846 0.480086289 0.486484594 0.498853514 0.502696598 0.513972859 0.516376849 0.543686474 0.566882028 0.567621338 0.586127754 0.591827299 0.605631175 0.643656675 0.645244542 0.667703335 0.675541417 0.686131016 0.701178988 0.703182698 0.704295443 0.706934584 0.717086238 0.731822513 0.737068929 0.737991531 0.747303399 0.750742836 0.771602863 0.775957209 0.808281136 0.821656954 0.823498798 0.828085983 0.833890879 0.846833753 0.847484838 0.850031348 0.854414538 0.863123590 0.867454304 0.875034516 0.881535274 0.887426769 0.889782632 0.892461196 0.900831163 0.909185041 0.915567266 0.917671383 0.924392608 0.931702247 0.934991350 0.954795565 0.956882489 0.964689517 0.969689506 0.975361469 0.982307618 0.998537150 1.004513810 1.014752713 1.020841423 1.040012085 1.055026579 1.069219144 1.071085149 1.079037493 1.087271951 1.103282531 1.110254338 1.111599900 1.118486930 1.122497515 1.123505763 1.141364991 1.148309449 1.161679767 1.169969110 1.176546018 1.186929156 1.200680352 1.220847758 1.231205859 1.257817722 1.296347514 1.296836092 1.314636882 1.326342464 1.326713398 1.329888918 1.331014588 1.334656631 1.341719281 1.348355852 1.364969242 1.379652038 1.381139678 1.381562122 1.426472718 1.509968383 1.557880730 1.684655817 1.918232984</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">176</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90656285" y3="-0.95492107" z3="-0.69360999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57681897" y3="-1.95432431" z3="-1.58175391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06110003" y3="-0.99952336" z3="-1.44071916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75976235" y3="1.47604096" z3="-1.08393293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2791412" y3="0.31236211" z3="-0.50850775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64259134" y3="2.74267668" z3="-1.13748643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99704749" y3="2.73629206" z3="-0.8548165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38494947" y3="4.99867148" z3="-0.3507049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80358016" y3="3.85954921" z3="-0.85546478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76411242" y3="5.87537226" z3="-0.14064458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06436214" y3="1.61952279" z3="-1.65410923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12968912" y3="0.36482243" z3="0.22586609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70390586" y3="0.3897729" z3="-0.61178468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61187496" y3="0.73566217" z3="0.3320254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64353986" y3="-0.85013457" z3="-1.47579348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09836416" y3="-2.47573527" z3="-1.30249524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.11647639" y3="-5.49897344" z3="-6.23202549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.83129062" y3="-5.06381649" z3="-5.26992409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.086486" y3="-3.92138787" z3="-2.82709638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.79274765" y3="-3.68328593" z3="-5.12497311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52493051" y3="-5.88975121" z3="-4.18550562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16720206" y3="-5.31239305" z3="-2.97370525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42894493" y3="-3.0801286" z3="-3.91028285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03806551" y3="-3.01653428" z3="-5.95529398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.57864565" y3="-6.97747909" z3="-4.2769526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9670607" y3="-5.94506584" z3="-2.10477807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66623251" y3="-3.37235867" z3="-1.58882024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33771071" y3="-3.85962551" z3="-0.85144663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67514675" y3="-4.86292709" z3="-1.12341465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38858413" y3="-3.55658265" z3="0.59594504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44603431" y3="-3.0795908" z3="3.35347731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70546631" y3="-4.59043245" z3="1.48532341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12050072" y3="-2.27947868" z3="1.098363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14535682" y3="-2.0435091" z3="2.46854424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.725518" y3="-4.35396985" z3="2.85864001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89286134" y3="-5.59975788" z3="1.10498426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0963564" y3="-1.44094401" z3="0.4356163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08052725" y3="-1.03735186" z3="2.82899221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93929198" y3="-5.17714587" z3="3.54466407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45445602" y3="-2.89847081" z3="4.43224593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3790304" y3="-1.74450406" z3="-3.88354215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48994767" y3="-1.33554525" z3="-2.98020855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33080191" y3="3.7247806" z3="-0.99461455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12080783" y3="-2.99971309" z3="-1.72431476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91721708" y3="-3.16911174" z3="-0.58803216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11647116" y3="-2.28799018" z3="0.33651261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83758538" y3="-0.71660597" z3="0.58139924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.65422071" y3="-0.22322044" z3="-1.02215239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53262626" y3="0.4354181" z3="1.21847761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.12392676" y3="-1.05404368" z3="1.89893965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40497629" y3="-4.37761196" z3="-0.34901882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13125934" y3="-4.60799545" z3="0.8489883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.93554518" y3="0.10754726" z3="-1.78824934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34184968" y3="0.62141742" z3="-0.83343888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.24728558" y3="-1.05534094" z3="-1.44341357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63020446" y3="0.54239816" z3="0.58773026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1922468" y3="0.10624772" z3="2.21575467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99422838" y3="1.43394892" z3="1.33024175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5861741" y3="-0.10445663" z3="2.22267926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93246106" y3="-1.71129994" z3="1.53177482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.66668264" y3="-1.52686867" z3="2.78676136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06672748" y3="-4.02490255" z3="0.85454458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52596535" y3="-4.34786727" z3="1.73152122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36313501" y3="-5.681789" z3="0.84938711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27564609" y3="-2.19483091" z3="-0.17044934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13926239" y3="-3.30336715" z3="-1.01911948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49994812" y3="-4.46046885" z3="-0.59067147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9991833" y3="-4.50323978" z3="0.70492377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14349369" y3="-3.43466647" z3="1.58511338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77611055" y3="-2.28133677" z3="1.13914458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49638904" y3="-3.24309353" z3="-2.05055158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36450561" y3="-5.30985971" z3="-1.26135196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26124853" y3="-5.68812294" z3="1.14524111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73545997" y3="-3.50604938" z3="2.59440794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86723373" y3="-1.42746294" z3="1.81153229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48325921" y3="4.0147295" z3="0.10803431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85617811" y3="3.81162558" z3="0.05735909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41260044" y3="3.31999027" z3="-1.11836317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6373649" y3="3.05252405" z3="-2.24372485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26434644" y3="3.25083976" z3="-2.17256033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0241514" y3="4.35876495" z3="1.03756969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49239901" y3="4.00730084" z3="0.92172074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85128842" y3="3.04678918" z3="-1.16510639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11134021" y3="2.6803321" z3="-3.15271838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35789347" y3="3.01672705" z3="-3.03842995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16269023" y3="-5.88710864" z3="2.33516215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77192364" y3="-6.40015078" z3="0.28717399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35226082" y3="2.81775585" z3="-2.24496485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4629278" y3="3.04581697" z3="-0.11282282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59180208" y3="0.15749304" z3="-2.06735817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91975878" y3="1.40574234" z3="-1.92234869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.75773165" y3="0.08165989" z3="-2.87850909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.22409951" y3="1.18582236" z3="-3.54771676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27054" y3="-0.88074388" z3="-2.97042912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.11798929" y3="1.11507957" z3="-4.17366056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41104145" y3="2.52329795" z3="-2.65375512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.53165638" y3="2.41616432" z3="-3.44197906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88158739" y3="3.47626442" z3="-2.5914067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88778221" y3="3.28805938" z3="-3.99792724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58431867" y3="3.90447555" z3="-0.26582647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77179845" y3="5.0570487" z3="-0.05508204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94185881" y3="3.95413661" z3="0.15950755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47161555" y3="5.09736321" z3="0.70808193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56783866" y3="3.06607297" z3="0.05279452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51739092" y3="5.10945346" z3="1.02804117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35231893" y3="6.22985107" z3="0.50231298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67471548" y3="6.25621623" z3="0.86993558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71901733" y3="7.11109911" z3="0.64463662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10992464" y3="7.16203703" z3="1.30115748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32654514" y3="-3.95431743" z3="-2.88296602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51265868" y3="-4.98737621" z3="-2.55325025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1929592" y3="-3.63483359" z3="-3.49288097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44438384" y3="-3.95284187" z3="-3.54265345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68050153" y3="-1.61399945" z3="-2.11097721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41480463" y3="-1.14366771" z3="-2.78978402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51893164" y3="-0.94809116" z3="-1.24885703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7298348" y3="-1.65827448" z3="-2.66405959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9066,-.9549,-.6936;6.5768,-1.9543,-1.5818;6.0611,-.9995,-1.4407;4.7598,1.476,-1.0839;4.2791,.3124,-.5085;2.6426,2.7427,-1.1375;3.997,2.7363,-.8548;2.3849,4.9987,-.3507;1.8036,3.8595,-.8555;1.7641,5.8754,-.1406;2.0644,1.6195,-1.6541;3.1297,.3648,.2259;1.7039,.3898,-.6118;.6119,.7357,.332;1.6435,-.8501,-1.4758;1.0984,-2.4757,-1.3025;2.1165,-5.499,-6.232;1.8313,-5.0638,-5.2699;1.0865,-3.9214,-2.8271;1.7927,-3.6833,-5.125;1.5249,-5.8898,-4.1855;1.1672,-5.3124,-2.9737;1.4289,-3.0801,-3.9103;2.0381,-3.0165,-5.9553;1.5786,-6.9775,-4.277;.9671,-5.9451,-2.1048;.6662,-3.3724,-1.5888;-.3377,-3.8596,-.8514;-.6751,-4.8629,-1.1234;-.3886,-3.5566,.5959;-.446,-3.0796,3.3535;-.7055,-4.5904,1.4853;-.1205,-2.2795,1.0984;-.1454,-2.0435,2.4685;-.7255,-4.354,2.8586;-.8929,-5.5998,1.105;.0964,-1.4409,.4356;.0805,-1.0374,2.829;-.9393,-5.1771,3.5447;-.4545,-2.8985,4.4322;1.379,-1.7445,-3.8835;1.4899,-1.3355,-2.9802;.3308,3.7248,-.9946;-2.1208,-2.9997,-1.7243;-2.9172,-3.1691,-.588;-3.1165,-2.288,.3365;-3.8376,-.7166,.5814;-4.6542,-.2232,-1.0222;-2.5326,.4354,1.2185;-5.1239,-1.054,1.8989;-3.405,-4.3776,-.349;-4.1313,-4.608,.849;-3.9355,.1075,-1.7882;-5.3418,.6214,-.8334;-5.2473,-1.0553,-1.4434;-1.6302,.5424,.5877;-2.1922,.1062,2.2158;-2.9942,1.4339,1.3302;-5.5862,-.1045,2.2227;-5.9325,-1.7113,1.5318;-4.6667,-1.5269,2.7868;-5.0667,-4.0249,.8545;-3.526,-4.3479,1.7315;-4.3631,-5.6818,.8494;4.2756,-2.1948,-.1704;4.1393,-3.3034,-1.0191;3.4999,-4.4605,-.5907;2.9992,-4.5032,.7049;3.1435,-3.4347,1.5851;3.7761,-2.2813,1.1391;4.4964,-3.2431,-2.0506;3.3645,-5.3099,-1.2614;2.2612,-5.6881,1.1452;2.7355,-3.506,2.5944;3.8672,-1.4275,1.8115;-.4833,4.0147,.108;-1.8562,3.8116,.0574;-2.4126,3.32,-1.1184;-1.6374,3.0525,-2.2437;-.2643,3.2508,-2.1726;-.0242,4.3588,1.0376;-2.4924,4.0073,.9217;-3.8513,3.0468,-1.1651;-2.1113,2.6803,-3.1527;.3579,3.0167,-3.0384;2.1627,-5.8871,2.3352;1.7719,-6.4002,.2872;-4.3523,2.8178,-2.245;-4.4629,3.0458,-.1128;6.5918,.1575,-2.0674;5.9198,1.4057,-1.9223;7.7577,.0817,-2.8785;8.2241,1.1858,-3.5477;8.2705,-.8807,-2.9704;9.118,1.1151,-4.1737;6.411,2.5233,-2.6538;7.5317,2.4162,-3.442;5.8816,3.4763,-2.5914;7.8878,3.2881,-3.9979;4.5843,3.9045,-.2658;3.7718,5.057,-.0551;5.9419,3.9541,.1595;6.4716,5.0974,.7081;6.5678,3.0661,.0528;7.5174,5.1095,1.028;4.3523,6.2299,.5023;5.6747,6.2562,.8699;3.719,7.1111,.6446;6.1099,7.162,1.3012;-2.3265,-3.9543,-2.883;-2.5127,-4.9874,-2.5533;-3.193,-3.6348,-3.4929;-1.4444,-3.9528,-3.5427;-1.6805,-1.614,-2.111;-2.4148,-1.1437,-2.7898;-1.5189,-.9481,-1.2489;-.7298,-1.6583,-2.6641;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662899895575</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001251224600 0.000277240172 0.016307315773 0.005334559438</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056889322 -0.000541559 0.000196347 0.000339363 0.000375882 0.000393421 0.000478796 0.000517640 0.000624697 0.000701355 0.000818978 0.000906082 0.001077398 0.001144078 0.001289802 0.001345629 0.001391695 0.001529709 0.001964364 0.002203656 0.002311743 0.002518962 0.002697574 0.003195663 0.003450944 0.003780322 0.004195092 0.004386878 0.004630884 0.004738749 0.005032801 0.005199573 0.005992354 0.006099220 0.006677996 0.006826427 0.007073374 0.007319228 0.008131731 0.008352762 0.008840800 0.009262881 0.009703308 0.010171848 0.010935263 0.011237841 0.011361396 0.012199535 0.013199858 0.013465922 0.013854655 0.014558122 0.014887322 0.015459171 0.015743726 0.016535519 0.016934335 0.017947935 0.018512006 0.019304412 0.020040637 0.020278731 0.021040356 0.021715444 0.022119100 0.022690639 0.023350239 0.023679728 0.024487985 0.025827314 0.026340659 0.026587404 0.027021526 0.027222629 0.028105221 0.028915885 0.030801112 0.031410604 0.032648236 0.033808593 0.034367945 0.035767540 0.038883332 0.039194337 0.041869838 0.045359438 0.045526057 0.045891753 0.048545185 0.049491659 0.049732942 0.050281087 0.051527067 0.052042330 0.052283439 0.052382914 0.052657415 0.053340756 0.054661815 0.055587178 0.056314134 0.056542897 0.056649175 0.056967597 0.057578204 0.058425895 0.059182857 0.059613716 0.060780791 0.061957737 0.062503490 0.064186778 0.064440897 0.064892533 0.065770668 0.067151175 0.067793717 0.068850706 0.070425728 0.071783581 0.072101735 0.072515958 0.072888840 0.075287371 0.078443111 0.080631124 0.081460019 0.083152325 0.083362870 0.086531511 0.088572403 0.089311562 0.089779592 0.091272557 0.093220724 0.094491807 0.095443543 0.096147774 0.096796689 0.098113019 0.100005301 0.100423998 0.102445304 0.103390024 0.104026475 0.106146016 0.108465456 0.110529372 0.111860055 0.112185702 0.113256461 0.114315488 0.116357793 0.116784229 0.117584588 0.118474416 0.120252148 0.121801792 0.124473450 0.125440347 0.128389259 0.128821866 0.130334080 0.133416093 0.136019618 0.137600327 0.138480694 0.138686700 0.139820167 0.141681310 0.143478726 0.145566131 0.146244205 0.151656193 0.153246840 0.153404480 0.159972667 0.160849558 0.168434578 0.171304235 0.175821577 0.178756182 0.181318466 0.183872868 0.188804072 0.189340265 0.191575097 0.200770322 0.202124401 0.206227762 0.206883157 0.207210227 0.211695253 0.212233044 0.212561324 0.213447761 0.216526628 0.218262178 0.220573386 0.224145028 0.225403556 0.231804124 0.234527122 0.235326912 0.238329886 0.245234040 0.247277906 0.251187446 0.256461877 0.257162903 0.258026185 0.262282249 0.271535201 0.282674919 0.291785724 0.299618528 0.299908324 0.300935296 0.307008803 0.307743271 0.309612420 0.318904341 0.321260407 0.326272237 0.329703925 0.335266368 0.347606958 0.351959354 0.355579127 0.359707240 0.361328001 0.364070063 0.384285931 0.406721629 0.411859118 0.430169445 0.431881778 0.434926929 0.450148979 0.464390562 0.473592261 0.478709337 0.480123259 0.486484966 0.498853537 0.502715679 0.513981278 0.516378454 0.543686544 0.566887814 0.567626475 0.586127677 0.591834078 0.605632043 0.643684600 0.645249326 0.667704439 0.675542352 0.686172097 0.701248161 0.703193703 0.704297078 0.706938505 0.717088739 0.731896020 0.737138219 0.737995050 0.747325136 0.750743041 0.771602916 0.775957316 0.808355812 0.821657145 0.823532315 0.828096319 0.833891562 0.846863650 0.847515810 0.850034071 0.854438443 0.863144788 0.867454935 0.875049372 0.881678708 0.887452693 0.889860696 0.892470555 0.900835676 0.909211976 0.915571140 0.917687855 0.924392943 0.931703498 0.935005710 0.954796040 0.956913895 0.964767479 0.969689685 0.975422773 0.982328863 0.998537583 1.004526358 1.014764002 1.020903983 1.040013221 1.055026645 1.069224523 1.071164387 1.079053142 1.087275515 1.103305405 1.110254740 1.111599906 1.118489429 1.122497631 1.123506455 1.141490178 1.148322810 1.161680439 1.169969477 1.176546235 1.186940545 1.200683523 1.220852949 1.231208134 1.257834399 1.296348233 1.296843825 1.314637375 1.326344185 1.326713900 1.329893478 1.331020868 1.334657219 1.341725203 1.348385170 1.365000360 1.379654434 1.381141946 1.381562054 1.426473731 1.510083887 1.557882688 1.684656303 1.918232232</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">177</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9053068" y3="-0.95473294" z3="-0.69489572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57377128" y3="-1.95430721" z3="-1.58615064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05798789" y3="-0.99961216" z3="-1.44480976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75688477" y3="1.47589225" z3="-1.08709033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27784921" y3="0.31249396" z3="-0.50972944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63975973" y3="2.74324306" z3="-1.13504304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99501064" y3="2.73638563" z3="-0.85604268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3848502" y3="4.99874965" z3="-0.34690295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80199769" y3="3.86017376" z3="-0.85110185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76483793" y3="5.87535297" z3="-0.13535843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05961677" y3="1.62043448" z3="-1.65027666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13001899" y3="0.36521404" z3="0.22709058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7022694" y3="0.3901705" z3="-0.60742452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6123062" y3="0.73491973" z3="0.33924645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64022885" y3="-0.84926371" z3="-1.47222787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09948041" y3="-2.47626074" z3="-1.29957361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.13278371" y3="-5.50279819" z3="-6.2243269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.84446432" y3="-5.06702268" z3="-5.2634286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09169348" y3="-3.92268301" z3="-2.82358784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.80575591" y3="-3.68645491" z3="-5.11942843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.53434765" y3="-5.89217664" z3="-4.17944181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17263927" y3="-5.31383889" z3="-2.96925719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.43828447" y3="-3.08235574" z3="-3.90622711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05396927" y3="-3.02020969" z3="-5.9493026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.58837318" y3="-6.98000783" z3="-4.2698837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96987539" y3="-5.94596447" z3="-2.1005295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66830606" y3="-3.37303728" z3="-1.5866004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33677575" y3="-3.86018801" z3="-0.85075964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67326981" y3="-4.86413545" z3="-1.122978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38942597" y3="-3.558157" z3="0.59700622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45189579" y3="-3.08438932" z3="3.35516884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70841009" y3="-4.59315195" z3="1.48517052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12079396" y3="-2.28211314" z3="1.10122619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14919707" y3="-2.04716162" z3="2.47150009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73094322" y3="-4.35839433" z3="2.85860975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89868928" y3="-5.59908303" z3="1.10205468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09882893" y3="-1.44305022" z3="0.4403655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07379046" y3="-1.03854449" z3="2.83228474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94498278" y3="-5.18294955" z3="3.54456762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46368735" y3="-2.90345669" z3="4.43391894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.38986461" y3="-1.74673088" z3="-3.88135109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49270339" y3="-1.33607985" z3="-2.97654644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32886772" y3="3.72637026" z3="-0.98816437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.117958" y3="-3.00015418" z3="-1.72595828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91696069" y3="-3.16870897" z3="-0.59120135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11925388" y3="-2.28597871" z3="0.33161884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83839417" y3="-0.71533855" z3="0.57682716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64701145" y3="-0.21542608" z3="-1.0292866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53244244" y3="0.43230393" z3="1.22091916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.12963748" y3="-1.0528164" z3="1.8878949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40445488" y3="-4.37795681" z3="-0.35232839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13538528" y3="-4.6071675" z3="0.84246208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.92520935" y3="0.12338074" z3="-1.7893199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33648122" y3="0.62748047" z3="-0.84138355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.23793469" y3="-1.04508449" z3="-1.45803189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63040356" y3="0.54066001" z3="0.59218468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19511778" y3="0.09771322" z3="2.21766288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99216886" y3="1.43141246" z3="1.33534663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.59231074" y3="-0.10167193" z3="2.209727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93707303" y3="-1.70814929" z3="1.51790205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.67615756" y3="-1.52605567" z3="2.77622162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06976264" y3="-4.02238482" z3="0.8455259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53315345" y3="-4.34950704" z3="1.72685538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36912194" y3="-5.67966027" z3="0.84040474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27588372" y3="-2.1945134" z3="-0.16943609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13701509" y3="-3.30238539" z3="-1.0173274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49840574" y3="-4.45923777" z3="-0.58694555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00064197" y3="-4.50272991" z3="0.70958174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14743092" y3="-3.43464004" z3="1.58897553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77957189" y3="-2.28143657" z3="1.14120825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49123369" y3="-3.24152737" z3="-2.04948196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36012049" y3="-5.30710605" z3="-1.2572394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26165324" y3="-5.68626709" z3="1.15098644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74098099" y3="-3.50568355" z3="2.59885271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87211171" y3="-1.42743807" z3="1.81311326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4830919" y3="4.01274507" z3="0.11769729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85611643" y3="3.81058047" z3="0.06873616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41462101" y3="3.32381051" z3="-1.10822347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64146386" y3="3.05966137" z3="-2.23631984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26827403" y3="3.25660998" z3="-2.16682683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02128519" y3="4.35211044" z3="1.04853028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49155865" y3="4.0050161" z3="0.93274195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85337794" y3="3.0520115" z3="-1.15355807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11723706" y3="2.69122359" z3="-3.14603656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35319465" y3="3.02339423" z3="-3.03282321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16254401" y3="-5.88405182" z3="2.34094889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77155386" y3="-6.39800532" z3="0.29333414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35620687" y3="2.82962793" z3="-2.23379125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46363116" y3="3.04633223" z3="-0.1011582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58652177" y3="0.15689276" z3="-2.07425689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91463376" y3="1.40511947" z3="-1.92858633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74998521" y3="0.08044763" z3="-2.88888748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.21413787" y3="1.18400743" z3="-3.56065505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.26260433" y3="-0.88197143" z3="-2.9814761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.10605109" y3="1.11275271" z3="-4.18935453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.40367785" y3="2.52207525" z3="-2.66244208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.52192019" y3="2.41435031" z3="-3.45395041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87428228" y3="3.47497883" z3="-2.59945092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.87630762" y3="3.28574861" z3="-4.01181246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58415678" y3="3.90424461" z3="-0.26823618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77237318" y3="5.05663277" z3="-0.05451225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94298862" y3="3.95367042" z3="0.15298772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47428926" y3="5.09644276" z3="0.70103814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56871397" y3="3.06586364" z3="0.04375448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52104111" y3="5.10835209" z3="1.01778666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35445636" y3="6.22888713" z3="0.50236335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67782704" y3="6.25499445" z3="0.86630013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7215681" y3="7.10986358" z3="0.64711798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11418479" y3="7.16038683" z3="1.29727922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32237807" y3="-3.95555812" z3="-2.88507366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51027214" y3="-4.98858946" z3="-2.55377433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18606354" y3="-3.63452366" z3="-3.49714997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43861944" y3="-3.95591958" z3="-3.54284581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67476194" y3="-1.61513537" z3="-2.11287637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40495138" y3="-1.14201316" z3="-2.79402238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51626931" y3="-0.95021828" z3="-1.24885687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71948033" y3="-1.66319556" z3="-2.66179778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9053,-.9547,-.6949;6.5738,-1.9543,-1.5862;6.058,-.9996,-1.4448;4.7569,1.4759,-1.0871;4.2778,.3125,-.5097;2.6398,2.7432,-1.135;3.995,2.7364,-.856;2.3849,4.9987,-.3469;1.802,3.8602,-.8511;1.7648,5.8754,-.1354;2.0596,1.6204,-1.6503;3.13,.3652,.2271;1.7023,.3902,-.6074;.6123,.7349,.3392;1.6402,-.8493,-1.4722;1.0995,-2.4763,-1.2996;2.1328,-5.5028,-6.2243;1.8445,-5.067,-5.2634;1.0917,-3.9227,-2.8236;1.8058,-3.6865,-5.1194;1.5343,-5.8922,-4.1794;1.1726,-5.3138,-2.9693;1.4383,-3.0824,-3.9062;2.054,-3.0202,-5.9493;1.5884,-6.98,-4.2699;.9699,-5.946,-2.1005;.6683,-3.373,-1.5866;-.3368,-3.8602,-.8508;-.6733,-4.8641,-1.123;-.3894,-3.5582,.597;-.4519,-3.0844,3.3552;-.7084,-4.5932,1.4852;-.1208,-2.2821,1.1012;-.1492,-2.0472,2.4715;-.7309,-4.3584,2.8586;-.8987,-5.5991,1.1021;.0988,-1.4431,.4404;.0738,-1.0385,2.8323;-.945,-5.1829,3.5446;-.4637,-2.9035,4.4339;1.3899,-1.7467,-3.8814;1.4927,-1.3361,-2.9765;.3289,3.7264,-.9882;-2.118,-3.0002,-1.726;-2.917,-3.1687,-.5912;-3.1193,-2.286,.3316;-3.8384,-.7153,.5768;-4.647,-.2154,-1.0293;-2.5324,.4323,1.2209;-5.1296,-1.0528,1.8879;-3.4045,-4.378,-.3523;-4.1354,-4.6072,.8425;-3.9252,.1234,-1.7893;-5.3365,.6275,-.8414;-5.2379,-1.0451,-1.458;-1.6304,.5407,.5922;-2.1951,.0977,2.2177;-2.9922,1.4314,1.3353;-5.5923,-.1017,2.2097;-5.9371,-1.7081,1.5179;-4.6762,-1.5261,2.7762;-5.0698,-4.0224,.8455;-3.5332,-4.3495,1.7269;-4.3691,-5.6797,.8404;4.2759,-2.1945,-.1694;4.137,-3.3024,-1.0173;3.4984,-4.4592,-.5869;3.0006,-4.5027,.7096;3.1474,-3.4346,1.589;3.7796,-2.2814,1.1412;4.4912,-3.2415,-2.0495;3.3601,-5.3071,-1.2572;2.2617,-5.6863,1.151;2.741,-3.5057,2.5989;3.8721,-1.4274,1.8131;-.4831,4.0127,.1177;-1.8561,3.8106,.0687;-2.4146,3.3238,-1.1082;-1.6415,3.0597,-2.2363;-.2683,3.2566,-2.1668;-.0213,4.3521,1.0485;-2.4916,4.005,.9327;-3.8534,3.052,-1.1536;-2.1172,2.6912,-3.146;.3532,3.0234,-3.0328;2.1625,-5.8841,2.3409;1.7716,-6.398,.2933;-4.3562,2.8296,-2.2338;-4.4636,3.0463,-.1012;6.5865,.1569,-2.0743;5.9146,1.4051,-1.9286;7.75,.0804,-2.8889;8.2141,1.184,-3.5607;8.2626,-.882,-2.9815;9.1061,1.1128,-4.1894;6.4037,2.5221,-2.6624;7.5219,2.4144,-3.454;5.8743,3.475,-2.5995;7.8763,3.2857,-4.0118;4.5842,3.9042,-.2682;3.7724,5.0566,-.0545;5.943,3.9537,.153;6.4743,5.0964,.701;6.5687,3.0659,.0438;7.521,5.1084,1.0178;4.3545,6.2289,.5024;5.6778,6.255,.8663;3.7216,7.1099,.6471;6.1142,7.1604,1.2973;-2.3224,-3.9556,-2.8851;-2.5103,-4.9886,-2.5538;-3.1861,-3.6345,-3.4971;-1.4386,-3.9559,-3.5428;-1.6748,-1.6151,-2.1129;-2.405,-1.142,-2.794;-1.5163,-.9502,-1.2489;-.7195,-1.6632,-2.6618;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662891522417</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001199983727 0.000278218666 0.018534812490 0.005334682795</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056890237 -0.000582508 0.000194246 0.000340863 0.000375552 0.000393293 0.000479315 0.000517463 0.000624850 0.000704703 0.000826027 0.000906634 0.001077360 0.001144673 0.001293074 0.001346450 0.001393424 0.001530194 0.002029202 0.002210515 0.002311442 0.002524532 0.002698375 0.003197297 0.003467489 0.003780974 0.004212474 0.004391373 0.004630613 0.004752050 0.005040492 0.005199819 0.005999953 0.006117967 0.006679363 0.006826102 0.007075724 0.007319932 0.008142994 0.008353051 0.008841698 0.009295772 0.009704778 0.010199270 0.010937098 0.011237774 0.011365649 0.012225856 0.013200191 0.013487160 0.013854676 0.014558036 0.014893842 0.015458897 0.015743828 0.016536510 0.016970572 0.017955059 0.018516485 0.019308875 0.020117893 0.020278471 0.021041549 0.021740030 0.022120012 0.022692782 0.023350200 0.023718898 0.024487896 0.025828681 0.026341519 0.026595037 0.027022278 0.027238316 0.028106715 0.028922595 0.030803649 0.031410648 0.032649051 0.033808530 0.034383925 0.035775050 0.038894841 0.039198090 0.041869838 0.045361722 0.045529318 0.045903170 0.048545674 0.049493443 0.049733138 0.050307261 0.051527450 0.052045334 0.052283439 0.052383180 0.052665828 0.053344863 0.054665718 0.055602939 0.056316299 0.056546420 0.056649676 0.056967768 0.057578241 0.058430857 0.059185100 0.059619964 0.060781204 0.061958338 0.062503961 0.064187247 0.064458593 0.064903456 0.065794471 0.067156096 0.067802493 0.068856286 0.070428445 0.071783669 0.072105247 0.072516687 0.072888803 0.075287307 0.078462560 0.080633846 0.081460677 0.083154475 0.083362712 0.086552354 0.088574705 0.089318946 0.089780874 0.091272569 0.093221743 0.094493715 0.095443534 0.096148218 0.096796917 0.098113377 0.100010972 0.100447949 0.102445987 0.103390988 0.104027678 0.106146327 0.108469096 0.110531867 0.111863136 0.112186129 0.113259039 0.114319757 0.116469987 0.116785568 0.117619906 0.118475664 0.120252329 0.121802809 0.124489363 0.125439990 0.128393918 0.128821783 0.130364491 0.133416675 0.136030156 0.137618349 0.138484712 0.138782165 0.139819996 0.141682328 0.143492207 0.145566156 0.146283725 0.151658837 0.153288251 0.153419181 0.159988437 0.160849393 0.168440155 0.171304376 0.175822415 0.178756481 0.181321690 0.183872693 0.188805803 0.189354705 0.191579048 0.200772495 0.202126429 0.206235136 0.206883446 0.207210771 0.211729468 0.212253873 0.212561539 0.213454405 0.216527232 0.218266044 0.220577470 0.224153801 0.225403833 0.231805640 0.234527348 0.235331641 0.238330403 0.245238602 0.247283818 0.251191729 0.256462578 0.257165929 0.258026176 0.262283718 0.271535204 0.282678999 0.291785699 0.299656105 0.299910749 0.300941911 0.307008815 0.307743415 0.309612684 0.318925720 0.321261340 0.326272337 0.329753502 0.335267860 0.347609005 0.351961614 0.355579315 0.359801429 0.361372073 0.364071693 0.384285955 0.406721489 0.411904364 0.430169943 0.431883887 0.434946541 0.450190806 0.464394488 0.473592685 0.478725693 0.480146049 0.486486979 0.498853836 0.502741748 0.513988903 0.516382805 0.543686674 0.566889083 0.567626700 0.586128714 0.591837503 0.605633312 0.643708631 0.645250538 0.667707286 0.675542591 0.686230405 0.701280265 0.703206598 0.704297192 0.706938972 0.717092891 0.731991001 0.737166279 0.737996758 0.747339365 0.750743417 0.771603056 0.775957566 0.808439500 0.821657145 0.823567982 0.828122027 0.833892612 0.846901960 0.847586761 0.850043863 0.854450145 0.863161915 0.867455853 0.875063033 0.881800770 0.887475086 0.889989516 0.892481029 0.900839973 0.909249950 0.915586502 0.917715387 0.924393372 0.931703886 0.935021527 0.954797674 0.956997927 0.964812067 0.969690546 0.975444430 0.982339997 0.998539122 1.004541114 1.014774765 1.020943548 1.040015378 1.055026692 1.069227899 1.071211400 1.079054563 1.087275908 1.103338022 1.110254803 1.111599943 1.118496124 1.122497638 1.123506487 1.141589124 1.148332276 1.161681855 1.169969481 1.176546831 1.186944095 1.200685161 1.220853329 1.231210136 1.257843052 1.296348782 1.296884530 1.314637479 1.326346321 1.326715844 1.329895582 1.331080599 1.334657209 1.341725253 1.348404593 1.365029536 1.379683315 1.381152662 1.381562439 1.426474467 1.510117561 1.557885052 1.684657997 1.918280874</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">178</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90466132" y3="-0.95457567" z3="-0.69737115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57097214" y3="-1.95423826" z3="-1.59276115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05535811" y3="-0.99957721" z3="-1.45042685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7551991" y3="1.47595619" z3="-1.08984281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27775529" y3="0.31280357" z3="-0.51084026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63796825" y3="2.74285329" z3="-1.13258895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99382432" y3="2.73626015" z3="-0.8569889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3844423" y3="4.99785446" z3="-0.3419695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80067476" y3="3.85952984" z3="-0.84550331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76462694" y3="5.87418711" z3="-0.12775783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05672578" y3="1.62016181" z3="-1.64686444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13150392" y3="0.36604647" z3="0.22848798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70266773" y3="0.38893418" z3="-0.6039127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61346483" y3="0.73173287" z3="0.34420663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64143948" y3="-0.85056049" z3="-1.4683589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10089885" y3="-2.47807371" z3="-1.29533185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.14757414" y3="-5.50467798" z3="-6.21614963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.85607962" y3="-5.06885596" z3="-5.25628406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09630608" y3="-3.92471165" z3="-2.81889921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.81636123" y3="-3.68825519" z3="-5.11262144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5428381" y3="-5.89404923" z3="-4.17325544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.177763" y3="-5.31582357" z3="-2.96417402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4448585" y3="-3.08417747" z3="-3.90071848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06694369" y3="-3.02209491" z3="-5.94183719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59718331" y3="-6.98183036" z3="-4.26350778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97292099" y3="-5.9479243" z3="-2.09591714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67065985" y3="-3.37531796" z3="-1.58261761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33631087" y3="-3.86178381" z3="-0.84963561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67331265" y3="-4.86469873" z3="-1.12365598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39274871" y3="-3.56021337" z3="0.59790698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45811323" y3="-3.09013559" z3="3.35673856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71551199" y3="-4.59526305" z3="1.48412282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12292572" y3="-2.28508334" z3="1.10412278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1520483" y3="-2.05255119" z3="2.4748936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73946852" y3="-4.36231585" z3="2.85797187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90457678" y3="-5.60293679" z3="1.10073813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0989995" y3="-1.44539567" z3="0.44448081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07469715" y3="-1.04735883" z3="2.83827777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.95768792" y3="-5.18659808" z3="3.54145355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46974924" y3="-2.9116612" z3="4.43592863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39477701" y3="-1.7485647" z3="-3.87566875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4989182" y3="-1.33843731" z3="-2.9722074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32736883" y3="3.72585065" z3="-0.97990553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1163363" y3="-2.99976053" z3="-1.72959763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91722315" y3="-3.16661613" z3="-0.59590705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11810504" y3="-2.28462463" z3="0.3273757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8359802" y3="-0.7127064" z3="0.57210753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6372577" y3="-0.20847466" z3="-1.03598149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53101535" y3="0.43064471" z3="1.22375733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1351624" y3="-1.05089063" z3="1.87651141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40836625" y3="-4.3741455" z3="-0.35785658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13878205" y3="-4.60301215" z3="0.8382141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.91250348" y3="0.13343084" z3="-1.79091525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33263164" y3="0.63011422" z3="-0.848242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.2208382" y3="-1.04005153" z3="-1.47180785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62513026" y3="0.53925421" z3="0.59772267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19632966" y3="0.09309913" z3="2.21986868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9900437" y3="1.42953876" z3="1.34041754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.59798832" y3="-0.10114294" z3="2.19920314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.94207338" y3="-1.70470258" z3="1.49936724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.68746838" y3="-1.52725057" z3="2.7674783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07375306" y3="-4.01890181" z3="0.84008859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53566623" y3="-4.3427002" z3="1.72257327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37210392" y3="-5.67671226" z3="0.83892815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27661766" y3="-2.19393347" z3="-0.1695553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14156821" y3="-3.30590367" z3="-1.0144224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50332413" y3="-4.46219857" z3="-0.58212217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00181014" y3="-4.50078433" z3="0.71334505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14544334" y3="-3.42886785" z3="1.59021002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77772348" y3="-2.27667633" z3="1.14069764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4978429" y3="-3.2487949" z3="-2.04638251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36887249" y3="-5.31422783" z3="-1.25008099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26203531" y3="-5.68337478" z3="1.15635555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73722586" y3="-3.49710298" z3="2.59968438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86778721" y3="-1.41978495" z3="1.81020492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48300476" y3="4.01094008" z3="0.12671976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85649525" y3="3.8108219" z3="0.07839983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41693635" y3="3.3273517" z3="-1.09846467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64529612" y3="3.06431118" z3="-2.22742188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27161388" y3="3.25884906" z3="-2.15863314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02064763" y3="4.34916485" z3="1.0566306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49008226" y3="4.00289511" z3="0.9454042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85662963" y3="3.05900393" z3="-1.14376987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12260897" y3="2.69865381" z3="-3.13726543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34823247" y3="3.02768683" z3="-3.0271325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16079393" y3="-5.8779109" z3="2.34673132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77372338" y3="-6.39780571" z3="0.29974135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36177724" y3="2.8438675" z3="-2.2242468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4646583" y3="3.04742681" z3="-0.08942171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58197099" y3="0.15671706" z3="-2.08182296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91046565" y3="1.40499934" z3="-1.93459729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.74290477" y3="0.08010282" z3="-2.90002442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.20466608" y3="1.18343403" z3="-3.57381307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25540265" y3="-0.88228177" z3="-2.99381102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.09453283" y3="1.11199206" z3="-4.20537652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39700832" y3="2.52177926" z3="-2.67031631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.51266257" y3="2.41379625" z3="-3.46544514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86763283" y3="3.47465757" z3="-2.60582551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.86509366" y3="3.28495547" z3="-4.02490672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58427456" y3="3.90388744" z3="-0.27020765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77279164" y3="5.05590116" z3="-0.05333046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9442101" y3="3.95330459" z3="0.14732652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47678842" y3="5.09572932" z3="0.69472034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56978212" y3="3.06572617" z3="0.03571322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.524355" y3="5.10765128" z3="1.00865514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35612832" y3="6.22780189" z3="0.50287514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68052995" y3="6.25390613" z3="0.86314583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7234369" y3="7.10853966" z3="0.65030908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11788675" y3="7.1590036" z3="1.29362009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3187214" y3="-3.95638095" z3="-2.88805742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50992745" y3="-4.98850543" z3="-2.5566005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18044841" y3="-3.63522598" z3="-3.50405114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43301279" y3="-3.95968296" z3="-3.54315711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67170821" y3="-1.61518336" z3="-2.11672766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40338903" y3="-1.14276934" z3="-2.7971626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50993295" y3="-0.94908124" z3="-1.25447736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72119049" y3="-1.66253254" z3="-2.66896107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9047,-.9546,-.6974;6.571,-1.9542,-1.5928;6.0554,-.9996,-1.4504;4.7552,1.476,-1.0898;4.2778,.3128,-.5108;2.638,2.7429,-1.1326;3.9938,2.7363,-.857;2.3844,4.9979,-.342;1.8007,3.8595,-.8455;1.7646,5.8742,-.1278;2.0567,1.6202,-1.6469;3.1315,.366,.2285;1.7027,.3889,-.6039;.6135,.7317,.3442;1.6414,-.8506,-1.4684;1.1009,-2.4781,-1.2953;2.1476,-5.5047,-6.2161;1.8561,-5.0689,-5.2563;1.0963,-3.9247,-2.8189;1.8164,-3.6883,-5.1126;1.5428,-5.894,-4.1733;1.1778,-5.3158,-2.9642;1.4449,-3.0842,-3.9007;2.0669,-3.0221,-5.9418;1.5972,-6.9818,-4.2635;.9729,-5.9479,-2.0959;.6707,-3.3753,-1.5826;-.3363,-3.8618,-.8496;-.6733,-4.8647,-1.1237;-.3927,-3.5602,.5979;-.4581,-3.0901,3.3567;-.7155,-4.5953,1.4841;-.1229,-2.2851,1.1041;-.152,-2.0526,2.4749;-.7395,-4.3623,2.858;-.9046,-5.6029,1.1007;.099,-1.4454,.4445;.0747,-1.0474,2.8383;-.9577,-5.1866,3.5415;-.4697,-2.9117,4.4359;1.3948,-1.7486,-3.8757;1.4989,-1.3384,-2.9722;.3274,3.7259,-.9799;-2.1163,-2.9998,-1.7296;-2.9172,-3.1666,-.5959;-3.1181,-2.2846,.3274;-3.836,-.7127,.5721;-4.6373,-.2085,-1.036;-2.531,.4306,1.2238;-5.1352,-1.0509,1.8765;-3.4084,-4.3741,-.3579;-4.1388,-4.603,.8382;-3.9125,.1334,-1.7909;-5.3326,.6301,-.8482;-5.2208,-1.0401,-1.4718;-1.6251,.5393,.5977;-2.1963,.0931,2.2199;-2.99,1.4295,1.3404;-5.598,-.1011,2.1992;-5.9421,-1.7047,1.4994;-4.6875,-1.5273,2.7675;-5.0738,-4.0189,.8401;-3.5357,-4.3427,1.7226;-4.3721,-5.6767,.8389;4.2766,-2.1939,-.1696;4.1416,-3.3059,-1.0144;3.5033,-4.4622,-.5821;3.0018,-4.5008,.7133;3.1454,-3.4289,1.5902;3.7777,-2.2767,1.1407;4.4978,-3.2488,-2.0464;3.3689,-5.3142,-1.2501;2.262,-5.6834,1.1564;2.7372,-3.4971,2.5997;3.8678,-1.4198,1.8102;-.483,4.0109,.1267;-1.8565,3.8108,.0784;-2.4169,3.3274,-1.0985;-1.6453,3.0643,-2.2274;-.2716,3.2588,-2.1586;-.0206,4.3492,1.0566;-2.4901,4.0029,.9454;-3.8566,3.059,-1.1438;-2.1226,2.6987,-3.1373;.3482,3.0277,-3.0271;2.1608,-5.8779,2.3467;1.7737,-6.3978,.2997;-4.3618,2.8439,-2.2242;-4.4647,3.0474,-.0894;6.582,.1567,-2.0818;5.9105,1.405,-1.9346;7.7429,.0801,-2.9;8.2047,1.1834,-3.5738;8.2554,-.8823,-2.9938;9.0945,1.112,-4.2054;6.397,2.5218,-2.6703;7.5127,2.4138,-3.4654;5.8676,3.4747,-2.6058;7.8651,3.285,-4.0249;4.5843,3.9039,-.2702;3.7728,5.0559,-.0533;5.9442,3.9533,.1473;6.4768,5.0957,.6947;6.5698,3.0657,.0357;7.5244,5.1077,1.0087;4.3561,6.2278,.5029;5.6805,6.2539,.8631;3.7234,7.1085,.6503;6.1179,7.159,1.2936;-2.3187,-3.9564,-2.8881;-2.5099,-4.9885,-2.5566;-3.1804,-3.6352,-3.5041;-1.433,-3.9597,-3.5432;-1.6717,-1.6152,-2.1167;-2.4034,-1.1428,-2.7972;-1.5099,-.9491,-1.2545;-.7212,-1.6625,-2.669;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662881562055</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001502807044 0.000306333426 0.016796777100 0.005306045497</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056897429 -0.000635026 0.000191812 0.000340547 0.000375458 0.000393115 0.000480100 0.000518511 0.000624833 0.000705408 0.000832791 0.000906775 0.001079191 0.001145679 0.001295008 0.001348537 0.001393573 0.001531791 0.002058258 0.002263050 0.002320158 0.002524237 0.002699123 0.003196812 0.003475181 0.003781239 0.004216844 0.004406658 0.004631036 0.004756032 0.005088108 0.005199292 0.006000484 0.006118038 0.006684915 0.006826008 0.007081237 0.007325842 0.008150995 0.008361328 0.008843338 0.009318064 0.009707661 0.010207602 0.010942737 0.011239894 0.011371607 0.012244885 0.013200232 0.013513860 0.013854640 0.014558967 0.014902753 0.015458640 0.015744158 0.016536349 0.016981290 0.017960652 0.018537192 0.019308322 0.020182871 0.020279912 0.021042155 0.021756687 0.022120257 0.022695938 0.023350155 0.023748367 0.024488068 0.025829854 0.026341691 0.026601028 0.027025227 0.027256512 0.028106799 0.028933634 0.030803338 0.031410670 0.032653345 0.033809156 0.034399260 0.035777000 0.038922636 0.039219245 0.041871606 0.045362283 0.045529849 0.045933275 0.048546346 0.049494264 0.049733439 0.050326798 0.051527916 0.052049902 0.052283438 0.052383476 0.052669177 0.053348077 0.054674732 0.055613569 0.056317043 0.056550374 0.056649245 0.056967895 0.057578502 0.058435619 0.059185835 0.059621828 0.060781901 0.061958893 0.062504047 0.064187470 0.064472496 0.064911024 0.065806571 0.067158727 0.067808953 0.068861771 0.070432859 0.071784274 0.072116180 0.072516841 0.072889531 0.075287173 0.078477953 0.080643836 0.081460975 0.083161048 0.083366318 0.086570032 0.088574893 0.089323494 0.089781680 0.091272304 0.093222142 0.094497104 0.095443724 0.096150204 0.096797666 0.098115579 0.100017713 0.100490515 0.102446203 0.103391497 0.104028164 0.106148193 0.108481667 0.110535692 0.111862983 0.112187576 0.113276575 0.114324785 0.116563485 0.116786752 0.117669056 0.118475922 0.120252444 0.121803965 0.124507189 0.125440202 0.128394362 0.128825950 0.130417167 0.133416942 0.136043954 0.137631611 0.138486113 0.138894362 0.139821088 0.141682225 0.143508612 0.145566668 0.146346427 0.151666083 0.153332512 0.153440659 0.160007714 0.160849355 0.168441758 0.171304951 0.175826051 0.178756388 0.181333872 0.183872824 0.188811037 0.189361978 0.191582951 0.200785661 0.202130571 0.206237556 0.206883427 0.207211194 0.211754945 0.212271772 0.212561596 0.213467234 0.216527185 0.218266616 0.220582313 0.224153609 0.225403939 0.231807739 0.234527509 0.235338400 0.238330885 0.245252721 0.247294551 0.251199523 0.256464089 0.257168319 0.258027925 0.262283965 0.271535217 0.282687501 0.291786339 0.299694004 0.299913680 0.300945116 0.307008827 0.307743439 0.309612989 0.318970319 0.321267649 0.326272308 0.329809914 0.335270231 0.347615095 0.351963074 0.355579722 0.359858271 0.361399329 0.364073004 0.384290985 0.406721761 0.411919310 0.430170489 0.431888801 0.434947591 0.450241136 0.464404440 0.473616239 0.478733653 0.480159739 0.486498443 0.498855030 0.502770727 0.513999895 0.516385110 0.543688026 0.566889231 0.567626772 0.586130664 0.591841718 0.605636481 0.643709072 0.645250598 0.667711498 0.675542747 0.686290194 0.701364208 0.703222021 0.704299740 0.706947241 0.717094731 0.732060907 0.737203815 0.737997950 0.747339377 0.750743700 0.771603169 0.775957655 0.808512519 0.821657167 0.823611465 0.828142888 0.833892656 0.846934457 0.847676348 0.850056981 0.854452100 0.863170975 0.867456608 0.875073842 0.881908073 0.887488240 0.890178314 0.892503559 0.900842156 0.909343703 0.915587934 0.917766362 0.924394252 0.931704365 0.935038208 0.954807965 0.957163034 0.964836630 0.969694558 0.975485694 0.982349098 0.998540679 1.004558447 1.014779915 1.020967153 1.040018947 1.055026700 1.069230988 1.071244952 1.079054904 1.087276468 1.103374192 1.110254849 1.111600146 1.118502751 1.122497654 1.123506488 1.141668258 1.148333763 1.161684779 1.169969601 1.176546839 1.186946003 1.200685256 1.220857726 1.231213431 1.257858073 1.296350138 1.296947493 1.314637471 1.326353084 1.326718498 1.329895735 1.331155646 1.334657240 1.341729856 1.348412756 1.365036379 1.379730714 1.381176157 1.381564024 1.426489854 1.510186998 1.557886103 1.684658423 1.918318072</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">179</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90437322" y3="-0.95437009" z3="-0.69943538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56886515" y3="-1.95366318" z3="-1.5986439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05306374" y3="-0.99923249" z3="-1.45560953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75278914" y3="1.47585195" z3="-1.09356735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27718609" y3="0.31286243" z3="-0.51271356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63516941" y3="2.74289963" z3="-1.13047479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99185848" y3="2.73614907" z3="-0.85853866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38366868" y3="4.99718138" z3="-0.33737421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79874048" y3="3.85940121" z3="-0.84098638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76438559" y3="5.87325864" z3="-0.12115075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05236368" y3="1.62030865" z3="-1.64326129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13276189" y3="0.36657348" z3="0.22934594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70122019" y3="0.38958784" z3="-0.59884071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61494825" y3="0.73282444" z3="0.35260549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63683627" y3="-0.85013332" z3="-1.46303562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10162142" y3="-2.47917011" z3="-1.29282151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.16253069" y3="-5.50999593" z3="-6.20889382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.86843938" y3="-5.07341819" z3="-5.25014267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10127527" y3="-3.92687693" z3="-2.8158638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.82984738" y3="-3.6927877" z3="-5.10731371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55084241" y3="-5.8976342" z3="-4.1675878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1819929" y3="-5.31818663" z3="-2.96011625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.45525439" y3="-3.08755818" z3="-3.89686213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.08374046" y3="-3.02726017" z3="-5.93605015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60475259" y3="-6.98554317" z3="-4.25685746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97406134" y3="-5.9496306" z3="-2.09212242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67197158" y3="-3.37595396" z3="-1.58156088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33575179" y3="-3.86360127" z3="-0.84934118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67210458" y3="-4.86673797" z3="-1.12435038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39315993" y3="-3.56439194" z3="0.5986406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46630959" y3="-3.09612565" z3="3.35730537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71876881" y3="-4.60051135" z3="1.48295997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12279863" y3="-2.29014296" z3="1.10694661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1563582" y3="-2.0581499" z3="2.47764025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7466472" y3="-4.3684979" z3="2.85671054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91008461" y3="-5.60531508" z3="1.09680707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10246856" y3="-1.45032632" z3="0.44891218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06835882" y3="-1.05146345" z3="2.84209566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.96625213" y3="-5.19379283" z3="3.5397451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48207533" y3="-2.91748695" z3="4.43639143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40826942" y3="-1.75201354" z3="-3.87324137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50299356" y3="-1.34032865" z3="-2.96797346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32508186" y3="3.72701862" z3="-0.97356274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11334438" y3="-3.00126722" z3="-1.72990362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91565781" y3="-3.16758299" z3="-0.59727117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1173763" y3="-2.28358901" z3="0.32440531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83527143" y3="-0.71058073" z3="0.56607296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62819244" y3="-0.20525626" z3="-1.04606086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53076344" y3="0.42993378" z3="1.22488227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14002847" y3="-1.04588528" z3="1.86480489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40713101" y3="-4.37531265" z3="-0.35839953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14149878" y3="-4.60095015" z3="0.83517459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.89870513" y3="0.14297658" z3="-1.79476207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.32572332" y3="0.63124331" z3="-0.85990106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.20731152" y3="-1.03580644" z3="-1.48807186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62596257" y3="0.53953984" z3="0.60085384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19934392" y3="0.08779082" z3="2.22139001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98882072" y3="1.4294663" z3="1.34363089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60102888" y3="-0.09343879" z3="2.1848773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.94706297" y3="-1.69653923" z3="1.48605532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.69655181" y3="-1.52413156" z3="2.75544074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07368808" y3="-4.01322023" z3="0.83594623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5403585" y3="-4.34447426" z3="1.72047176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37879865" y3="-5.67251956" z3="0.83371917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27795992" y3="-2.19374914" z3="-0.16938318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14143303" y3="-3.30529105" z3="-1.01307574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50333021" y3="-4.46108134" z3="-0.57915936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00265681" y3="-4.49937709" z3="0.71640001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14821564" y3="-3.42814147" z3="1.59221709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78081774" y3="-2.27658966" z3="1.14133945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49708203" y3="-3.24878096" z3="-2.04505723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36709148" y3="-5.31178341" z3="-1.24643389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26245389" y3="-5.68115223" z3="1.16087394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74014392" y3="-3.49534548" z3="2.60171885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87309577" y3="-1.4213198" z3="1.81112823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48332188" y3="4.01060444" z3="0.13537353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85702216" y3="3.81213926" z3="0.08897244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42001938" y3="3.33319696" z3="-1.0893772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65014214" y3="3.07110394" z3="-2.22000346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27603462" y3="3.26301738" z3="-2.1524186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01837195" y3="4.34493899" z3="1.06644949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48965616" y3="4.00411956" z3="0.95584572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85990518" y3="3.06724982" z3="-1.13294713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12935233" y3="2.70849015" z3="-3.1303266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34314324" y3="3.03095055" z3="-3.02006288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16033201" y3="-5.87389656" z3="2.35144604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77448074" y3="-6.39648226" z3="0.30495891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36712818" y3="2.85928884" z3="-2.21412299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46660343" y3="3.05167433" z3="-0.07863162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57735737" y3="0.15680007" z3="-2.08950764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90587796" y3="1.40492297" z3="-1.94120094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73591049" y3="0.08010043" z3="-2.91107776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.19548726" y3="1.18325493" z3="-3.58664622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.24834479" y3="-0.88219496" z3="-3.0060238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.08347532" y3="1.11172712" z3="-4.22081532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39022018" y3="2.52157473" z3="-2.67853995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5036597" y3="2.41355931" z3="-3.47667787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8608652" y3="3.47435298" z3="-2.61286325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.85442764" y3="3.28461937" z3="-4.03732417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58379119" y3="3.90339111" z3="-0.27234546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77261667" y3="5.05499958" z3="-0.05188806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94498751" y3="3.95272922" z3="0.14122623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47869898" y3="5.09465896" z3="0.68862259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57066461" y3="3.0655206" z3="0.02653951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5272445" y3="5.10651762" z3="0.9994253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35711083" y3="6.22636429" z3="0.50425521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68248019" y3="6.25238582" z3="0.86092196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72457139" y3="7.10668539" z3="0.65431644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12074187" y3="7.15706221" z3="1.29140835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31598544" y3="-3.95564641" z3="-2.88908043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50928418" y3="-4.98756793" z3="-2.55922914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17602118" y3="-3.63180349" z3="-3.50456487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4292259" y3="-3.95860061" z3="-3.54267658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66771055" y3="-1.61694908" z3="-2.11522012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39716504" y3="-1.14314806" z3="-2.79632899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50853726" y3="-0.95270971" z3="-1.2509297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71142113" y3="-1.66573671" z3="-2.6627059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9044,-.9544,-.6994;6.5689,-1.9537,-1.5986;6.0531,-.9992,-1.4556;4.7528,1.4759,-1.0936;4.2772,.3129,-.5127;2.6352,2.7429,-1.1305;3.9919,2.7361,-.8585;2.3837,4.9972,-.3374;1.7987,3.8594,-.841;1.7644,5.8733,-.1212;2.0524,1.6203,-1.6433;3.1328,.3666,.2293;1.7012,.3896,-.5988;.6149,.7328,.3526;1.6368,-.8501,-1.463;1.1016,-2.4792,-1.2928;2.1625,-5.51,-6.2089;1.8684,-5.0734,-5.2501;1.1013,-3.9269,-2.8159;1.8298,-3.6928,-5.1073;1.5508,-5.8976,-4.1676;1.182,-5.3182,-2.9601;1.4553,-3.0876,-3.8969;2.0837,-3.0273,-5.9361;1.6048,-6.9855,-4.2569;.9741,-5.9496,-2.0921;.672,-3.376,-1.5816;-.3358,-3.8636,-.8493;-.6721,-4.8667,-1.1244;-.3932,-3.5644,.5986;-.4663,-3.0961,3.3573;-.7188,-4.6005,1.483;-.1228,-2.2901,1.1069;-.1564,-2.0581,2.4776;-.7466,-4.3685,2.8567;-.9101,-5.6053,1.0968;.1025,-1.4503,.4489;.0684,-1.0515,2.8421;-.9663,-5.1938,3.5397;-.4821,-2.9175,4.4364;1.4083,-1.752,-3.8732;1.503,-1.3403,-2.968;.3251,3.727,-.9736;-2.1133,-3.0013,-1.7299;-2.9157,-3.1676,-.5973;-3.1174,-2.2836,.3244;-3.8353,-.7106,.5661;-4.6282,-.2053,-1.0461;-2.5308,.4299,1.2249;-5.14,-1.0459,1.8648;-3.4071,-4.3753,-.3584;-4.1415,-4.601,.8352;-3.8987,.143,-1.7948;-5.3257,.6312,-.8599;-5.2073,-1.0358,-1.4881;-1.626,.5395,.6009;-2.1993,.0878,2.2214;-2.9888,1.4295,1.3436;-5.601,-.0934,2.1849;-5.9471,-1.6965,1.4861;-4.6966,-1.5241,2.7554;-5.0737,-4.0132,.8359;-3.5404,-4.3445,1.7205;-4.3788,-5.6725,.8337;4.278,-2.1937,-.1694;4.1414,-3.3053,-1.0131;3.5033,-4.4611,-.5792;3.0027,-4.4994,.7164;3.1482,-3.4281,1.5922;3.7808,-2.2766,1.1413;4.4971,-3.2488,-2.0451;3.3671,-5.3118,-1.2464;2.2625,-5.6812,1.1609;2.7401,-3.4953,2.6017;3.8731,-1.4213,1.8111;-.4833,4.0106,.1354;-1.857,3.8121,.089;-2.42,3.3332,-1.0894;-1.6501,3.0711,-2.22;-.276,3.263,-2.1524;-.0184,4.3449,1.0664;-2.4897,4.0041,.9558;-3.8599,3.0672,-1.1329;-2.1294,2.7085,-3.1303;.3431,3.031,-3.0201;2.1603,-5.8739,2.3514;1.7745,-6.3965,.305;-4.3671,2.8593,-2.2141;-4.4666,3.0517,-.0786;6.5774,.1568,-2.0895;5.9059,1.4049,-1.9412;7.7359,.0801,-2.9111;8.1955,1.1833,-3.5866;8.2483,-.8822,-3.006;9.0835,1.1117,-4.2208;6.3902,2.5216,-2.6785;7.5037,2.4136,-3.4767;5.8609,3.4744,-2.6129;7.8544,3.2846,-4.0373;4.5838,3.9034,-.2723;3.7726,5.055,-.0519;5.945,3.9527,.1412;6.4787,5.0947,.6886;6.5707,3.0655,.0265;7.5272,5.1065,.9994;4.3571,6.2264,.5043;5.6825,6.2524,.8609;3.7246,7.1067,.6543;6.1207,7.1571,1.2914;-2.316,-3.9556,-2.8891;-2.5093,-4.9876,-2.5592;-3.176,-3.6318,-3.5046;-1.4292,-3.9586,-3.5427;-1.6677,-1.6169,-2.1152;-2.3972,-1.1431,-2.7963;-1.5085,-.9527,-1.2509;-.7114,-1.6657,-2.6627;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662871088582</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001855433218 0.000313052389 0.020651290146 0.005347883643</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056909396 -0.000675250 0.000189798 0.000341402 0.000376213 0.000392961 0.000480083 0.000517932 0.000626665 0.000705340 0.000831214 0.000907690 0.001080306 0.001154176 0.001294692 0.001350350 0.001394579 0.001535052 0.002054098 0.002279182 0.002350658 0.002524767 0.002713709 0.003200983 0.003474654 0.003782692 0.004218653 0.004426715 0.004634305 0.004755931 0.005145660 0.005199108 0.006002229 0.006120230 0.006699110 0.006826773 0.007090714 0.007333697 0.008151606 0.008387023 0.008844788 0.009335666 0.009710619 0.010206513 0.010944577 0.011248219 0.011385561 0.012256499 0.013200468 0.013536970 0.013854781 0.014559735 0.014908343 0.015458616 0.015744299 0.016536896 0.016985461 0.017961441 0.018555461 0.019311064 0.020239436 0.020283592 0.021042308 0.021764716 0.022122463 0.022698894 0.023350094 0.023766677 0.024488725 0.025831204 0.026342792 0.026602888 0.027029682 0.027275185 0.028106971 0.028955803 0.030804073 0.031411056 0.032655802 0.033809689 0.034415458 0.035778565 0.038949730 0.039256260 0.041875344 0.045362340 0.045531709 0.045965676 0.048547403 0.049494186 0.049734429 0.050348513 0.051528348 0.052056817 0.052283437 0.052383779 0.052670071 0.053350290 0.054688890 0.055624739 0.056317311 0.056556154 0.056649667 0.056967879 0.057579805 0.058441618 0.059185776 0.059621913 0.060781953 0.061959430 0.062503992 0.064187458 0.064485816 0.064920045 0.065806344 0.067158501 0.067819368 0.068864627 0.070442042 0.071784370 0.072132095 0.072518023 0.072891888 0.075290711 0.078487696 0.080661174 0.081466974 0.083166790 0.083378247 0.086579985 0.088575819 0.089324385 0.089782635 0.091274047 0.093222694 0.094498689 0.095444961 0.096150942 0.096798331 0.098121259 0.100019734 0.100533200 0.102452564 0.103396930 0.104030227 0.106159602 0.108498181 0.110536362 0.111872132 0.112189328 0.113321336 0.114328510 0.116630514 0.116789280 0.117724780 0.118476093 0.120252440 0.121803571 0.124513634 0.125440034 0.128394329 0.128837173 0.130483958 0.133416899 0.136051601 0.137645406 0.138486097 0.139028392 0.139821424 0.141682234 0.143523790 0.145566619 0.146386159 0.151674707 0.153346402 0.153480332 0.160033912 0.160854274 0.168441654 0.171305389 0.175829084 0.178756433 0.181343198 0.183873216 0.188819922 0.189364667 0.191589528 0.200812986 0.202135619 0.206237777 0.206883551 0.207211704 0.211785561 0.212283117 0.212563911 0.213482148 0.216528567 0.218266691 0.220586842 0.224159563 0.225404036 0.231810552 0.234527749 0.235345350 0.238331450 0.245322562 0.247322794 0.251215649 0.256464022 0.257170037 0.258035687 0.262284746 0.271535335 0.282703969 0.291787489 0.299708746 0.299915764 0.300946701 0.307008984 0.307743581 0.309615361 0.319011425 0.321274424 0.326272395 0.329852151 0.335277622 0.347627357 0.351964453 0.355579827 0.359889372 0.361413266 0.364074001 0.384297272 0.406721767 0.411928174 0.430170906 0.431889334 0.434988736 0.450300071 0.464414145 0.473680177 0.478737118 0.480166745 0.486512807 0.498857079 0.502788841 0.514011436 0.516384815 0.543691960 0.566889553 0.567627205 0.586131812 0.591841828 0.605640106 0.643709366 0.645250572 0.667714600 0.675543942 0.686349533 0.701421308 0.703277728 0.704308669 0.706970475 0.717096187 0.732134132 0.737210041 0.737998098 0.747340254 0.750743905 0.771603376 0.775957654 0.808562786 0.821657389 0.823664477 0.828174691 0.833893063 0.846962404 0.847811006 0.850093028 0.854452129 0.863173576 0.867457655 0.875081976 0.881981787 0.887496674 0.890360353 0.892560749 0.900842202 0.909470704 0.915590305 0.917817359 0.924395039 0.931704601 0.935050190 0.954840670 0.957445304 0.964844794 0.969694991 0.975498157 0.982351360 0.998542202 1.004586434 1.014785107 1.020989566 1.040022343 1.055026698 1.069234727 1.071264460 1.079057203 1.087278430 1.103393401 1.110254980 1.111600226 1.118513783 1.122497806 1.123506698 1.141734944 1.148333697 1.161689664 1.169969602 1.176547592 1.186945992 1.200685413 1.220889918 1.231219497 1.257859523 1.296352026 1.296999855 1.314637495 1.326353293 1.326718380 1.329896002 1.331208722 1.334657330 1.341749342 1.348414115 1.365037676 1.379760150 1.381190486 1.381567485 1.426530056 1.510212693 1.557888816 1.684660927 1.918425759</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">180</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90384711" y3="-0.9540219" z3="-0.70164564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56665941" y3="-1.95279326" z3="-1.60450867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05071902" y3="-0.99857563" z3="-1.46054171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75032335" y3="1.47604319" z3="-1.09573079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27659409" y3="0.31298393" z3="-0.51358054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63256171" y3="2.74267354" z3="-1.12745684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98980597" y3="2.73607669" z3="-0.85878126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38314327" y3="4.99692002" z3="-0.33346961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79701817" y3="3.85932309" z3="-0.83586013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76441713" y3="5.87296831" z3="-0.11580191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04849015" y3="1.62021647" z3="-1.63916934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13365404" y3="0.36622556" z3="0.23077192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70121649" y3="0.38756354" z3="-0.59534858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61574386" y3="0.72767878" z3="0.3579408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63782352" y3="-0.85153186" z3="-1.46025079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1023556" y3="-2.48130999" z3="-1.28922655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.17763872" y3="-5.51310076" z3="-6.20047812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.87984591" y3="-5.07633944" z3="-5.24294183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10491478" y3="-3.92977123" z3="-2.81128656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.84098813" y3="-3.69565049" z3="-5.10016738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55765227" y3="-5.90048802" z3="-4.16176967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18519593" y3="-5.32107239" z3="-2.9555499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4617572" y3="-3.09026955" z3="-3.89119275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09850384" y3="-3.03032877" z3="-5.92791352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61109143" y3="-6.98838088" z3="-4.25100265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97432416" y3="-5.95256666" z3="-2.08834812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67415733" y3="-3.3794974" z3="-1.57719428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33491523" y3="-3.8660082" z3="-0.8472664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6718827" y3="-4.86838778" z3="-1.12348164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3959737" y3="-3.56622894" z3="0.60045241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46947959" y3="-3.10271874" z3="3.36032906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72501218" y3="-4.60231102" z3="1.48335526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12406626" y3="-2.29309891" z3="1.11040525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15775149" y3="-2.0637051" z3="2.48168134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.75288339" y3="-4.37276676" z3="2.8576638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91640188" y3="-5.60799636" z3="1.09669069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10315107" y3="-1.45256857" z3="0.45358582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06988249" y3="-1.05947864" z3="2.84800484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.97551137" y3="-5.19817541" z3="3.53880571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48461547" y3="-2.92665396" z3="4.43988318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41361949" y3="-1.75456763" z3="-3.86749789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51017209" y3="-1.34321764" z3="-2.96391194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32318342" y3="3.72738717" z3="-0.96591712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11245126" y3="-3.00123172" z3="-1.73229612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91699746" y3="-3.16510639" z3="-0.60099662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11981756" y3="-2.28094462" z3="0.32004424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83391297" y3="-0.70722681" z3="0.56111595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.61732128" y3="-0.19435184" z3="-1.05371236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52942247" y3="0.42776964" z3="1.22718231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14672027" y3="-1.04274392" z3="1.85203849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41127325" y3="-4.37133841" z3="-0.36325264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14601935" y3="-4.59712813" z3="0.83028439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.88447778" y3="0.15708539" z3="-1.79619349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3200108" y3="0.63897557" z3="-0.86966609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.19095722" y3="-1.02523012" z3="-1.50443103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61937562" y3="0.53722853" z3="0.6065853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20110561" y3="0.08304067" z3="2.22266819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98581099" y3="1.42740113" z3="1.3474073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60807173" y3="-0.09151901" z3="2.17272834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95330956" y3="-1.69154595" z3="1.46540403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.70965859" y3="-1.52333042" z3="2.74619621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07988821" y3="-4.01067849" z3="0.82838599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54530301" y3="-4.33746022" z3="1.71640976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38159691" y3="-5.67036226" z3="0.83116767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27912188" y3="-2.19340532" z3="-0.16979738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14150679" y3="-3.30578581" z3="-1.01259317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5042114" y3="-4.4614046" z3="-0.57694509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00525406" y3="-4.49875154" z3="0.71936354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15242805" y3="-3.42680322" z3="1.59448772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78477327" y3="-2.27568275" z3="1.14208983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49451956" y3="-3.24942877" z3="-2.04551968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36798478" y3="-5.31366833" z3="-1.24322825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26388344" y3="-5.67940009" z3="1.16494037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74668196" y3="-3.49400792" z3="2.60489459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87787844" y3="-1.41908214" z3="1.81089447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48376688" y3="4.01027789" z3="0.14394942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85790129" y3="3.81408541" z3="0.09803391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42214455" y3="3.33681102" z3="-1.07916471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65391511" y3="3.07578457" z3="-2.21115385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27956974" y3="3.26583475" z3="-2.14487785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01823424" y3="4.3442019" z3="1.07382214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4891225" y3="4.00512575" z3="0.96672079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86270666" y3="3.07391244" z3="-1.12260929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13429647" y3="2.71525473" z3="-3.12132943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.33768355" y3="3.03641809" z3="-3.01619246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16079767" y3="-5.87031273" z3="2.35570175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77612048" y3="-6.39579238" z3="0.30976809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3717781" y3="2.87289486" z3="-2.20377161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46748193" y3="3.05244167" z3="-0.06655736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57275979" y3="0.15749416" z3="-2.09619204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90111215" y3="1.40536114" z3="-1.94650857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72900935" y3="0.0810452" z3="-2.92100512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18600854" y3="1.18409935" z3="-3.59852993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.24165889" y3="-0.88101191" z3="-3.01691701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.07217936" y3="1.11272705" z3="-4.23525537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38272459" y3="2.5219259" z3="-2.68580494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.49385578" y3="2.41406959" z3="-3.48724701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85300273" y3="3.47441758" z3="-2.61906616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.84251364" y3="3.28497682" z3="-4.04948893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58322104" y3="3.90315552" z3="-0.27387121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77275746" y3="5.05463035" z3="-0.05108655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94537123" y3="3.95231812" z3="0.13641851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4805223" y3="5.09390678" z3="0.68308662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57061148" y3="3.06522235" z3="0.01996822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52973094" y3="5.10562369" z3="0.99145908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3586337" y3="6.22561996" z3="0.50440002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6848176" y3="6.25142801" z3="0.85798855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72644423" y3="7.10585411" z3="0.65694064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1241028" y3="7.15576811" z3="1.28813215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31281158" y3="-3.95959933" z3="-2.89032583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51008609" y3="-4.99046232" z3="-2.55704371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16963304" y3="-3.63569025" z3="-3.51186453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42374329" y3="-3.96839688" z3="-3.54103732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66307958" y3="-1.61825362" z3="-2.119755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39202363" y3="-1.14365699" z3="-2.801866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50118664" y3="-0.95243856" z3="-1.25709986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71219436" y3="-1.6687659" z3="-2.67074222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9038,-.954,-.7016;6.5667,-1.9528,-1.6045;6.0507,-.9986,-1.4605;4.7503,1.476,-1.0957;4.2766,.313,-.5136;2.6326,2.7427,-1.1275;3.9898,2.7361,-.8588;2.3831,4.9969,-.3335;1.797,3.8593,-.8359;1.7644,5.873,-.1158;2.0485,1.6202,-1.6392;3.1337,.3662,.2308;1.7012,.3876,-.5953;.6157,.7277,.3579;1.6378,-.8515,-1.4603;1.1024,-2.4813,-1.2892;2.1776,-5.5131,-6.2005;1.8798,-5.0763,-5.2429;1.1049,-3.9298,-2.8113;1.841,-3.6957,-5.1002;1.5577,-5.9005,-4.1618;1.1852,-5.3211,-2.9555;1.4618,-3.0903,-3.8912;2.0985,-3.0303,-5.9279;1.6111,-6.9884,-4.251;.9743,-5.9526,-2.0883;.6742,-3.3795,-1.5772;-.3349,-3.866,-.8473;-.6719,-4.8684,-1.1235;-.396,-3.5662,.6005;-.4695,-3.1027,3.3603;-.725,-4.6023,1.4834;-.1241,-2.2931,1.1104;-.1578,-2.0637,2.4817;-.7529,-4.3728,2.8577;-.9164,-5.608,1.0967;.1032,-1.4526,.4536;.0699,-1.0595,2.848;-.9755,-5.1982,3.5388;-.4846,-2.9267,4.4399;1.4136,-1.7546,-3.8675;1.5102,-1.3432,-2.9639;.3232,3.7274,-.9659;-2.1125,-3.0012,-1.7323;-2.917,-3.1651,-.601;-3.1198,-2.2809,.32;-3.8339,-.7072,.5611;-4.6173,-.1944,-1.0537;-2.5294,.4278,1.2272;-5.1467,-1.0427,1.852;-3.4113,-4.3713,-.3633;-4.146,-4.5971,.8303;-3.8845,.1571,-1.7962;-5.32,.639,-.8697;-5.191,-1.0252,-1.5044;-1.6194,.5372,.6066;-2.2011,.083,2.2227;-2.9858,1.4274,1.3474;-5.6081,-.0915,2.1727;-5.9533,-1.6915,1.4654;-4.7097,-1.5233,2.7462;-5.0799,-4.0107,.8284;-3.5453,-4.3375,1.7164;-4.3816,-5.6704,.8312;4.2791,-2.1934,-.1698;4.1415,-3.3058,-1.0126;3.5042,-4.4614,-.5769;3.0053,-4.4988,.7194;3.1524,-3.4268,1.5945;3.7848,-2.2757,1.1421;4.4945,-3.2494,-2.0455;3.368,-5.3137,-1.2432;2.2639,-5.6794,1.1649;2.7467,-3.494,2.6049;3.8779,-1.4191,1.8109;-.4838,4.0103,.1439;-1.8579,3.8141,.098;-2.4221,3.3368,-1.0792;-1.6539,3.0758,-2.2112;-.2796,3.2658,-2.1449;-.0182,4.3442,1.0738;-2.4891,4.0051,.9667;-3.8627,3.0739,-1.1226;-2.1343,2.7153,-3.1213;.3377,3.0364,-3.0162;2.1608,-5.8703,2.3557;1.7761,-6.3958,.3098;-4.3718,2.8729,-2.2038;-4.4675,3.0524,-.0666;6.5728,.1575,-2.0962;5.9011,1.4054,-1.9465;7.729,.081,-2.921;8.186,1.1841,-3.5985;8.2417,-.881,-3.0169;9.0722,1.1127,-4.2353;6.3827,2.5219,-2.6858;7.4939,2.4141,-3.4872;5.853,3.4744,-2.6191;7.8425,3.285,-4.0495;4.5832,3.9032,-.2739;3.7728,5.0546,-.0511;5.9454,3.9523,.1364;6.4805,5.0939,.6831;6.5706,3.0652,.02;7.5297,5.1056,.9915;4.3586,6.2256,.5044;5.6848,6.2514,.858;3.7264,7.1059,.6569;6.1241,7.1558,1.2881;-2.3128,-3.9596,-2.8903;-2.5101,-4.9905,-2.557;-3.1696,-3.6357,-3.5119;-1.4237,-3.9684,-3.541;-1.6631,-1.6183,-2.1198;-2.392,-1.1437,-2.8019;-1.5012,-.9524,-1.2571;-.7122,-1.6688,-2.6707;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662859284372</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002030911771 0.000340753351 0.017115653217 0.005362905321</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056920938 -0.000729797 0.000188866 0.000339857 0.000375919 0.000392992 0.000480330 0.000518768 0.000629065 0.000705745 0.000840843 0.000908347 0.001082613 0.001161514 0.001301791 0.001350193 0.001399079 0.001538171 0.002084624 0.002277513 0.002363725 0.002524477 0.002726360 0.003204358 0.003478332 0.003783268 0.004218448 0.004448238 0.004642200 0.004758505 0.005183968 0.005208895 0.006001887 0.006126583 0.006702707 0.006828459 0.007099532 0.007338201 0.008151561 0.008421080 0.008844414 0.009341700 0.009711893 0.010211045 0.010944715 0.011255144 0.011409773 0.012262738 0.013200694 0.013550528 0.013854707 0.014559069 0.014907176 0.015458431 0.015744646 0.016536640 0.016984465 0.017961454 0.018561053 0.019314935 0.020274435 0.020284999 0.021045344 0.021772203 0.022128790 0.022700279 0.023350559 0.023776336 0.024488979 0.025832118 0.026345421 0.026603307 0.027034407 0.027290117 0.028108098 0.028982935 0.030804559 0.031412115 0.032662233 0.033809727 0.034431327 0.035779863 0.038964548 0.039299863 0.041877274 0.045362250 0.045535345 0.046032088 0.048547728 0.049494322 0.049737023 0.050374390 0.051528917 0.052067118 0.052283435 0.052384134 0.052669975 0.053350489 0.054704651 0.055634739 0.056317143 0.056557522 0.056651049 0.056967862 0.057583370 0.058447397 0.059185848 0.059621869 0.060786121 0.061959513 0.062505077 0.064187491 0.064498459 0.064928971 0.065806537 0.067159818 0.067825967 0.068867528 0.070452762 0.071785522 0.072153152 0.072518116 0.072894497 0.075293546 0.078492058 0.080677520 0.081479859 0.083175575 0.083403675 0.086588858 0.088577486 0.089324279 0.089783364 0.091277767 0.093223439 0.094499081 0.095445474 0.096151484 0.096798273 0.098134117 0.100020148 0.100541290 0.102463343 0.103417189 0.104031481 0.106178932 0.108508783 0.110537550 0.111891677 0.112190152 0.113383900 0.114331207 0.116678514 0.116796402 0.117783501 0.118476278 0.120252536 0.121803788 0.124526233 0.125442163 0.128397270 0.128845551 0.130557903 0.133416911 0.136052532 0.137657090 0.138486418 0.139185432 0.139821532 0.141683059 0.143527157 0.145570635 0.146382513 0.151673265 0.153344890 0.153521035 0.160050623 0.160855643 0.168441766 0.171305951 0.175831415 0.178758836 0.181346966 0.183875414 0.188827924 0.189364689 0.191595624 0.200855881 0.202140304 0.206237830 0.206883790 0.207212784 0.211810215 0.212287574 0.212578247 0.213492130 0.216531785 0.218269062 0.220588685 0.224170217 0.225404114 0.231813581 0.234528096 0.235351973 0.238332214 0.245399136 0.247343738 0.251226913 0.256465093 0.257170060 0.258048486 0.262287212 0.271535581 0.282720305 0.291787644 0.299710215 0.299916638 0.300946639 0.307009102 0.307744198 0.309621700 0.319050865 0.321275460 0.326272445 0.329881151 0.335289812 0.347632938 0.351966174 0.355579796 0.359900233 0.361419230 0.364074535 0.384298110 0.406721699 0.411929288 0.430171085 0.431892447 0.435100462 0.450350237 0.464422364 0.473772546 0.478737686 0.480168452 0.486528441 0.498860441 0.502812301 0.514026345 0.516386309 0.543694671 0.566889717 0.567627158 0.586131885 0.591841246 0.605644030 0.643710966 0.645250561 0.667718652 0.675545975 0.686417234 0.701565821 0.703351117 0.704319189 0.706998688 0.717096426 0.732201195 0.737218713 0.737998130 0.747340230 0.750744088 0.771603667 0.775957819 0.808589678 0.821658015 0.823717070 0.828200108 0.833895957 0.846978366 0.847948726 0.850139932 0.854452617 0.863174359 0.867458574 0.875088298 0.882060889 0.887501631 0.890528501 0.892672223 0.900842432 0.909630468 0.915590048 0.917909418 0.924395411 0.931704717 0.935057457 0.954886802 0.957760546 0.964846215 0.969698796 0.975559951 0.982351769 0.998542295 1.004636834 1.014786885 1.021018496 1.040024369 1.055026773 1.069241502 1.071282934 1.079062663 1.087279402 1.103405127 1.110254991 1.111600217 1.118522248 1.122498428 1.123507678 1.141777061 1.148334066 1.161692746 1.169971536 1.176550297 1.186945995 1.200685416 1.220953099 1.231231313 1.257859563 1.296354696 1.297024591 1.314637514 1.326354136 1.326718439 1.329896908 1.331208482 1.334657328 1.341767744 1.348414639 1.365043387 1.379760057 1.381190442 1.381567550 1.426616353 1.510253336 1.557890212 1.684660944 1.918501304</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">181</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90390104" y3="-0.95427211" z3="-0.70493123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56478196" y3="-1.95245505" z3="-1.61226196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0487881" y3="-0.99844642" z3="-1.46700797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74866382" y3="1.4757868" z3="-1.09883935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27683205" y3="0.31267605" z3="-0.51536796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63034343" y3="2.74178374" z3="-1.1246954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98833532" y3="2.73554904" z3="-0.85959013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3819466" y3="4.99539906" z3="-0.32834293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79509844" y3="3.85796004" z3="-0.83044062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76334864" y3="5.87116015" z3="-0.10833376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04535471" y3="1.61917862" z3="-1.63500679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13593299" y3="0.36616017" z3="0.23217577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70072322" y3="0.38734202" z3="-0.58964978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6181323" y3="0.72826877" z3="0.36668052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63415624" y3="-0.85222458" z3="-1.4537955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10434574" y3="-2.48422495" z3="-1.28497163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.18763498" y3="-5.51655951" z3="-6.19469113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.88865179" y3="-5.07969992" z3="-5.23769023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10978835" y3="-3.93221889" z3="-2.80772401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.85143308" y3="-3.69906959" z3="-5.09497561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5634203" y3="-5.90359271" z3="-4.15711373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18888721" y3="-5.32367203" z3="-2.95177351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47095997" y3="-3.09332648" z3="-3.88669135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.11116808" y3="-3.03376154" z3="-5.92207816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61598771" y3="-6.99157378" z3="-4.24613548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9755104" y3="-5.95493934" z3="-2.08496656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67594757" y3="-3.38087622" z3="-1.57520363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33436827" y3="-3.86810801" z3="-0.84660678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67053599" y3="-4.87076139" z3="-1.12346702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39660569" y3="-3.57025695" z3="0.60143205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47802485" y3="-3.10646482" z3="3.36072739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72802311" y3="-4.60716355" z3="1.48286152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12440516" y3="-2.29747944" z3="1.1129941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16175703" y3="-2.06804597" z3="2.48413894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.76002724" y3="-4.37742393" z3="2.85694096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92022101" y3="-5.61146511" z3="1.09457838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10585928" y3="-1.4570747" z3="0.45746553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06512974" y3="-1.06321202" z3="2.85156583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.98518393" y3="-5.20296055" z3="3.53728118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.49660887" y3="-2.92984377" z3="4.44015118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42659686" y3="-1.75783402" z3="-3.86374289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51291404" y3="-1.3453481" z3="-2.95779734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32098396" y3="3.72689029" z3="-0.95847559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10922863" y3="-3.00434621" z3="-1.73423857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91573162" y3="-3.16597233" z3="-0.60381345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11793013" y3="-2.27947112" z3="0.31524456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83218116" y3="-0.70476902" z3="0.55436629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.60646399" y3="-0.18958529" z3="-1.06340947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52747249" y3="0.4264712" z3="1.22884623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15243473" y3="-1.03836583" z3="1.83829679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41158518" y3="-4.37171205" z3="-0.36391165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14934964" y3="-4.59306751" z3="0.82867066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.86868632" y3="0.16967661" z3="-1.79873307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31205639" y3="0.64040582" z3="-0.87882551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.17400394" y3="-1.01975783" z3="-1.52034613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61914274" y3="0.53528175" z3="0.61053422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20391288" y3="0.07680477" z3="2.22554003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98204377" y3="1.42716775" z3="1.35029945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61199362" y3="-0.0845742" z3="2.15638644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95861281" y3="-1.6840049" z3="1.44928968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.72026565" y3="-1.52089642" z3="2.73192701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07936152" y3="-4.0021973" z3="0.82664399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54901149" y3="-4.33707028" z3="1.71482106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39039869" y3="-5.66386345" z3="0.82853205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28073481" y3="-2.19349487" z3="-0.17091292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14634732" y3="-3.3091074" z3="-1.01097354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50919403" y3="-4.46416555" z3="-0.57358825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00713729" y3="-4.49755413" z3="0.7217547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15157263" y3="-3.42246583" z3="1.59453251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78368777" y3="-2.27199802" z3="1.1404293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50188722" y3="-3.25636541" z3="-2.04344381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37434514" y3="-5.31794821" z3="-1.23832902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.265573" y3="-5.67750902" z3="1.16907279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74342436" y3="-3.4864811" z3="2.60433272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87456671" y3="-1.41331823" z3="1.80728074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48396129" y3="4.00978994" z3="0.15297622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85839182" y3="3.81567588" z3="0.10912069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42576555" y3="3.34273349" z3="-1.0697811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65917851" y3="3.08081876" z3="-2.20247128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28411584" y3="3.26723749" z3="-2.1369509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01593262" y3="4.34064103" z3="1.0837079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.488394" y3="4.00727555" z3="0.97813478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86695415" y3="3.08336335" z3="-1.11164365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14187065" y3="2.72298192" z3="-3.11297332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3327005" y3="3.03488009" z3="-3.00575903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16138872" y3="-5.86586567" z3="2.36012314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77852872" y3="-6.39561584" z3="0.31489307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37888047" y3="2.89001052" z3="-2.19333601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46987085" y3="3.05807248" z3="-0.055319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56878603" y3="0.15777002" z3="-2.10409718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89720073" y3="1.40548994" z3="-1.95254318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72287716" y3="0.08178871" z3="-2.93199217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.17767217" y3="1.18510942" z3="-3.61052736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23564761" y3="-0.88010329" z3="-3.02946822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.06212797" y3="1.1140621" z3="-4.24967364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3764961" y3="2.5223847" z3="-2.69272821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.48549324" y3="2.41496577" z3="-3.49710864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84665235" y3="3.47475998" z3="-2.62418469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.83235607" y3="3.28609486" z3="-4.060063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58276434" y3="3.90246818" z3="-0.27543284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77222065" y3="5.05343111" z3="-0.04940001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94608178" y3="3.95191094" z3="0.13105016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48206923" y3="5.09333238" z3="0.67714312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57158869" y3="3.06516282" z3="0.01190487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53221657" y3="5.10526062" z3="0.98248957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35900767" y3="6.22429448" z3="0.50529962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68620137" y3="6.250405" z3="0.85519349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72691879" y3="7.1041265" z3="0.65972084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12628024" y3="7.15464529" z3="1.28464462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30986806" y3="-3.96092393" z3="-2.8918055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50932815" y3="-4.99109963" z3="-2.5604505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16557798" y3="-3.63531755" z3="-3.51269435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41981248" y3="-3.96930407" z3="-3.54075959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66010114" y3="-1.62137854" z3="-2.12121377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38822717" y3="-1.14662212" z3="-2.803001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49898597" y3="-0.95650943" z3="-1.25768431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70379638" y3="-1.67308237" z3="-2.66828013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9039,-.9543,-.7049;6.5648,-1.9525,-1.6123;6.0488,-.9984,-1.467;4.7487,1.4758,-1.0988;4.2768,.3127,-.5154;2.6303,2.7418,-1.1247;3.9883,2.7355,-.8596;2.3819,4.9954,-.3283;1.7951,3.858,-.8304;1.7633,5.8712,-.1083;2.0454,1.6192,-1.635;3.1359,.3662,.2322;1.7007,.3873,-.5896;.6181,.7283,.3667;1.6342,-.8522,-1.4538;1.1043,-2.4842,-1.285;2.1876,-5.5166,-6.1947;1.8887,-5.0797,-5.2377;1.1098,-3.9322,-2.8077;1.8514,-3.6991,-5.095;1.5634,-5.9036,-4.1571;1.1889,-5.3237,-2.9518;1.471,-3.0933,-3.8867;2.1112,-3.0338,-5.9221;1.616,-6.9916,-4.2461;.9755,-5.9549,-2.085;.6759,-3.3809,-1.5752;-.3344,-3.8681,-.8466;-.6705,-4.8708,-1.1235;-.3966,-3.5703,.6014;-.478,-3.1065,3.3607;-.728,-4.6072,1.4829;-.1244,-2.2975,1.113;-.1618,-2.068,2.4841;-.76,-4.3774,2.8569;-.9202,-5.6115,1.0946;.1059,-1.4571,.4575;.0651,-1.0632,2.8516;-.9852,-5.203,3.5373;-.4966,-2.9298,4.4402;1.4266,-1.7578,-3.8637;1.5129,-1.3453,-2.9578;.321,3.7269,-.9585;-2.1092,-3.0043,-1.7342;-2.9157,-3.166,-.6038;-3.1179,-2.2795,.3152;-3.8322,-.7048,.5544;-4.6065,-.1896,-1.0634;-2.5275,.4265,1.2288;-5.1524,-1.0384,1.8383;-3.4116,-4.3717,-.3639;-4.1493,-4.5931,.8287;-3.8687,.1697,-1.7987;-5.3121,.6404,-.8788;-5.174,-1.0198,-1.5203;-1.6191,.5353,.6105;-2.2039,.0768,2.2255;-2.982,1.4272,1.3503;-5.612,-.0846,2.1564;-5.9586,-1.684,1.4493;-4.7203,-1.5209,2.7319;-5.0794,-4.0022,.8266;-3.549,-4.3371,1.7148;-4.3904,-5.6639,.8285;4.2807,-2.1935,-.1709;4.1463,-3.3091,-1.011;3.5092,-4.4642,-.5736;3.0071,-4.4976,.7218;3.1516,-3.4225,1.5945;3.7837,-2.272,1.1404;4.5019,-3.2564,-2.0434;3.3743,-5.3179,-1.2383;2.2656,-5.6775,1.1691;2.7434,-3.4865,2.6043;3.8746,-1.4133,1.8073;-.484,4.0098,.153;-1.8584,3.8157,.1091;-2.4258,3.3427,-1.0698;-1.6592,3.0808,-2.2025;-.2841,3.2672,-2.137;-.0159,4.3406,1.0837;-2.4884,4.0073,.9781;-3.867,3.0834,-1.1116;-2.1419,2.723,-3.113;.3327,3.0349,-3.0058;2.1614,-5.8659,2.3601;1.7785,-6.3956,.3149;-4.3789,2.89,-2.1933;-4.4699,3.0581,-.0553;6.5688,.1578,-2.1041;5.8972,1.4055,-1.9525;7.7229,.0818,-2.932;8.1777,1.1851,-3.6105;8.2356,-.8801,-3.0295;9.0621,1.1141,-4.2497;6.3765,2.5224,-2.6927;7.4855,2.415,-3.4971;5.8467,3.4748,-2.6242;7.8324,3.2861,-4.0601;4.5828,3.9025,-.2754;3.7722,5.0534,-.0494;5.9461,3.9519,.1311;6.4821,5.0933,.6771;6.5716,3.0652,.0119;7.5322,5.1053,.9825;4.359,6.2243,.5053;5.6862,6.2504,.8552;3.7269,7.1041,.6597;6.1263,7.1546,1.2846;-2.3099,-3.9609,-2.8918;-2.5093,-4.9911,-2.5605;-3.1656,-3.6353,-3.5127;-1.4198,-3.9693,-3.5408;-1.6601,-1.6214,-2.1212;-2.3882,-1.1466,-2.803;-1.499,-.9565,-1.2577;-.7038,-1.6731,-2.6683;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662846196552</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002247975311 0.000354642876 0.023624672814 0.005361130075</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056924471 -0.000810919 0.000188837 0.000337503 0.000378681 0.000393102 0.000480198 0.000519191 0.000631577 0.000708412 0.000865656 0.000908955 0.001082108 0.001162298 0.001309589 0.001351964 0.001397800 0.001544794 0.002131855 0.002305379 0.002375124 0.002527588 0.002724751 0.003205882 0.003491474 0.003784026 0.004219715 0.004464904 0.004652293 0.004769337 0.005183456 0.005220057 0.006001610 0.006126177 0.006704565 0.006831075 0.007103576 0.007339013 0.008151507 0.008452040 0.008849336 0.009344572 0.009711869 0.010218333 0.010946166 0.011267869 0.011439947 0.012263303 0.013201586 0.013550999 0.013856739 0.014560939 0.014909701 0.015458126 0.015744505 0.016537435 0.016983993 0.017968411 0.018560620 0.019317362 0.020283586 0.020317997 0.021050970 0.021774830 0.022143050 0.022700219 0.023351797 0.023779670 0.024488964 0.025833514 0.026351371 0.026603289 0.027036964 0.027300645 0.028108931 0.028999154 0.030804435 0.031412546 0.032663434 0.033810071 0.034449612 0.035781872 0.038968614 0.039331940 0.041876940 0.045363076 0.045541035 0.046106087 0.048547701 0.049496718 0.049739603 0.050411242 0.051529436 0.052079275 0.052283445 0.052384404 0.052671526 0.053350453 0.054720853 0.055652075 0.056316975 0.056559861 0.056650691 0.056968616 0.057589701 0.058451477 0.059185912 0.059621580 0.060801857 0.061959655 0.062514966 0.064187498 0.064508744 0.064939732 0.065807593 0.067166172 0.067832552 0.068871284 0.070458022 0.071791746 0.072186473 0.072518222 0.072897635 0.075301362 0.078493510 0.080687231 0.081495686 0.083183181 0.083432919 0.086592872 0.088579177 0.089325779 0.089784433 0.091281242 0.093225716 0.094508874 0.095445647 0.096151840 0.096799995 0.098147173 0.100028499 0.100540446 0.102471677 0.103461244 0.104031481 0.106199772 0.108510588 0.110546304 0.111905806 0.112190195 0.113438437 0.114334245 0.116703892 0.116813916 0.117840274 0.118476523 0.120253567 0.121805213 0.124538997 0.125457759 0.128401470 0.128849192 0.130616078 0.133417227 0.136052483 0.137663225 0.138487232 0.139360305 0.139822197 0.141683003 0.143527468 0.145590857 0.146427200 0.151677903 0.153351521 0.153576612 0.160072953 0.160865135 0.168441883 0.171305825 0.175835570 0.178761755 0.181346364 0.183876270 0.188829388 0.189366296 0.191596621 0.200888437 0.202145587 0.206237918 0.206883767 0.207214388 0.211834111 0.212287286 0.212610888 0.213497518 0.216534653 0.218270389 0.220588858 0.224179073 0.225404517 0.231817424 0.234528779 0.235360166 0.238333388 0.245530765 0.247381125 0.251229961 0.256471294 0.257170077 0.258063692 0.262294134 0.271536040 0.282733074 0.291788668 0.299711041 0.299917007 0.300946687 0.307009055 0.307745526 0.309636978 0.319088017 0.321276911 0.326272461 0.329894551 0.335308011 0.347635468 0.351967241 0.355580293 0.359924708 0.361421431 0.364074765 0.384298750 0.406722093 0.411929830 0.430171419 0.431896131 0.435180967 0.450370275 0.464428647 0.473861425 0.478738504 0.480168441 0.486540406 0.498864170 0.502846461 0.514039207 0.516388426 0.543695972 0.566889747 0.567627346 0.586132430 0.591841028 0.605646743 0.643711574 0.645250736 0.667720344 0.675547333 0.686495611 0.701723960 0.703452006 0.704327879 0.707015451 0.717096726 0.732291013 0.737218619 0.737998186 0.747340381 0.750744251 0.771604025 0.775958532 0.808593948 0.821659088 0.823765857 0.828233807 0.833899294 0.846993915 0.848109060 0.850193295 0.854452614 0.863181862 0.867459041 0.875096345 0.882132804 0.887506525 0.890663717 0.892827015 0.900844467 0.909742143 0.915590018 0.918001827 0.924395538 0.931704710 0.935063318 0.954959571 0.958144971 0.964847941 0.969702319 0.975614595 0.982351882 0.998542534 1.004712618 1.014787505 1.021056347 1.040024800 1.055026884 1.069252163 1.071299155 1.079072857 1.087279393 1.103408750 1.110255157 1.111600514 1.118532757 1.122498995 1.123508316 1.141793249 1.148334556 1.161693650 1.169978816 1.176554404 1.186946108 1.200686199 1.221021177 1.231247374 1.257862953 1.296356966 1.297056580 1.314637474 1.326355005 1.326720063 1.329897639 1.331236656 1.334658229 1.341799630 1.348416111 1.365064718 1.379774294 1.381198760 1.381567691 1.426723717 1.510271656 1.557893069 1.684661762 1.918606081</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">182</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90432608" y3="-0.95407091" z3="-0.70569785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56361153" y3="-1.95152626" z3="-1.61661819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04732535" y3="-0.99782625" z3="-1.4705849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74649611" y3="1.47567837" z3="-1.10095986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27666924" y3="0.31254242" z3="-0.51586531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62770373" y3="2.74130671" z3="-1.12163002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98637368" y3="2.73520866" z3="-0.85988767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38133341" y3="4.99490091" z3="-0.32494789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79325701" y3="3.85750699" z3="-0.82556205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76332005" y3="5.87057772" z3="-0.10407971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04130559" y3="1.61879078" z3="-1.63064129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13723613" y3="0.3658463" z3="0.23378563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70062015" y3="0.38577423" z3="-0.58506412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61975134" y3="0.72473039" z3="0.37387563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63356884" y3="-0.8533468" z3="-1.44969935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10402721" y3="-2.48518009" z3="-1.28251543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.19919755" y3="-5.51908892" z3="-6.18849253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.89768962" y3="-5.08202131" z3="-5.23225156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11282296" y3="-3.93453962" z3="-2.80409388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.86071425" y3="-3.70131207" z3="-5.08922969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56884264" y3="-5.90587533" z3="-4.15282607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19151988" y3="-5.32599542" z3="-2.94833851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47668913" y3="-3.09543244" z3="-3.88194572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.12343374" y3="-3.03624309" z3="-5.91556647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62093439" y3="-6.99387574" z3="-4.24196899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9759765" y3="-5.9573501" z3="-2.08219269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67765913" y3="-3.38384429" z3="-1.57179502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33349309" y3="-3.87078145" z3="-0.84489771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67002103" y3="-4.87273738" z3="-1.12308113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39890751" y3="-3.572613" z3="0.60281719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4818108" y3="-3.11236654" z3="3.36283444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73376292" y3="-4.60905418" z3="1.48312722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12565573" y3="-2.3008438" z3="1.11543326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16452456" y3="-2.07277289" z3="2.48674432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.76631774" y3="-4.381125" z3="2.85747954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9276147" y3="-5.61253386" z3="1.09376313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10628751" y3="-1.4601282" z3="0.46051462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06321427" y3="-1.06890936" z3="2.85503288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.99277793" y3="-5.20715771" z3="3.5373312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50117236" y3="-2.93725214" z3="4.44244491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43164794" y3="-1.75968668" z3="-3.85815347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52089767" y3="-1.34808991" z3="-2.95422561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31880933" y3="3.7269589" z3="-0.95064978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10810322" y3="-3.00498944" z3="-1.73501485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91540248" y3="-3.16534411" z3="-0.60530541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11817591" y3="-2.27849787" z3="0.31303865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8305235" y3="-0.70168032" z3="0.54732392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.5931286" y3="-0.1822323" z3="-1.07582644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52796737" y3="0.42490325" z3="1.22950911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15933441" y3="-1.03219384" z3="1.82270984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41257147" y3="-4.3702833" z3="-0.36516755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15039619" y3="-4.5907701" z3="0.82756329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.85107556" y3="0.18051961" z3="-1.803694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30475593" y3="0.64423283" z3="-0.89479881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.15391086" y3="-1.01309066" z3="-1.54268349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61255804" y3="0.5325763" z3="0.61592789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20868233" y3="0.07461191" z3="2.22585789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9806459" y3="1.42621499" z3="1.35063931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61923562" y3="-0.07898361" z3="2.14006928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96501374" y3="-1.67576685" z3="1.42566501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.73501946" y3="-1.51747654" z3="2.72075998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08149642" y3="-4.00015715" z3="0.82343937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5498892" y3="-4.33255062" z3="1.71408346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39097899" y3="-5.66271079" z3="0.82974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28282724" y3="-2.19358907" z3="-0.17015533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14459496" y3="-3.30702349" z3="-1.01055206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5073905" y3="-4.46162044" z3="-0.57230611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00805183" y3="-4.49641231" z3="0.72376453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15701805" y3="-3.42401589" z3="1.59696206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79012659" y3="-2.27439101" z3="1.14236902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.497367" y3="-3.25289091" z3="-2.04356407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37061278" y3="-5.31447376" z3="-1.23689773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2652709" y3="-5.67528969" z3="1.17157318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75127497" y3="-3.48899109" z3="2.6074415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88538689" y3="-1.41869946" z3="1.81063008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4843635" y3="4.00960673" z3="0.16221425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85930885" y3="3.81810531" z3="0.11935611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.428151" y3="3.34618738" z3="-1.05776255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66357139" y3="3.08465607" z3="-2.19223852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28831375" y3="3.26917579" z3="-2.1288208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01536407" y3="4.34025795" z3="1.09158514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48767138" y3="4.00932949" z3="0.99016395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86980679" y3="3.08981817" z3="-1.09866082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14750417" y3="2.72834852" z3="-3.10214795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3261022" y3="3.03943637" z3="-3.0022762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1602217" y3="-5.86269073" z3="2.36271994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77850232" y3="-6.39375411" z3="0.31768284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38339927" y3="2.90351252" z3="-2.18014076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47079719" y3="3.05836938" z3="-0.04073762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56488032" y3="0.15829956" z3="-2.1099442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89298801" y3="1.40566828" z3="-1.95747559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71681604" y3="0.08247567" z3="-2.94090065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.16940927" y3="1.18567435" z3="-3.62116817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22972482" y3="-0.87919396" z3="-3.03927423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.0522743" y3="1.11477961" z3="-4.26252902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36990657" y3="2.52239431" z3="-2.69954047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47697683" y3="2.41518323" z3="-3.50662825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83973203" y3="3.47443133" z3="-2.63039445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.82212099" y3="3.28621401" z3="-4.07084069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58218655" y3="3.90216358" z3="-0.27710121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7722322" y3="5.05298073" z3="-0.04919945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94641742" y3="3.95183876" z3="0.12617253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48364701" y3="5.09330113" z3="0.67105051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57163511" y3="3.0652899" z3="0.00591371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53442101" y3="5.10543381" z3="0.97399341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36019399" y3="6.2238289" z3="0.50428819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6881438" y3="6.25016241" z3="0.85105574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72818709" y3="7.10348354" z3="0.66080966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12906409" y3="7.15439133" z3="1.27971989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30749053" y3="-3.96438767" z3="-2.89176239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50846762" y3="-4.99410723" z3="-2.5574716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16159154" y3="-3.63924405" z3="-3.51595642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41646148" y3="-3.97598125" z3="-3.53967086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65539066" y3="-1.62369333" z3="-2.12278684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38308725" y3="-1.1483531" z3="-2.80552073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49298042" y3="-0.95767703" z3="-1.26014183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70365966" y3="-1.67622509" z3="-2.6724959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9043,-.9541,-.7057;6.5636,-1.9515,-1.6166;6.0473,-.9978,-1.4706;4.7465,1.4757,-1.101;4.2767,.3125,-.5159;2.6277,2.7413,-1.1216;3.9864,2.7352,-.8599;2.3813,4.9949,-.3249;1.7933,3.8575,-.8256;1.7633,5.8706,-.1041;2.0413,1.6188,-1.6306;3.1372,.3658,.2338;1.7006,.3858,-.5851;.6198,.7247,.3739;1.6336,-.8533,-1.4497;1.104,-2.4852,-1.2825;2.1992,-5.5191,-6.1885;1.8977,-5.082,-5.2323;1.1128,-3.9345,-2.8041;1.8607,-3.7013,-5.0892;1.5688,-5.9059,-4.1528;1.1915,-5.326,-2.9483;1.4767,-3.0954,-3.8819;2.1234,-3.0362,-5.9156;1.6209,-6.9939,-4.242;.976,-5.9574,-2.0822;.6777,-3.3838,-1.5718;-.3335,-3.8708,-.8449;-.67,-4.8727,-1.1231;-.3989,-3.5726,.6028;-.4818,-3.1124,3.3628;-.7338,-4.6091,1.4831;-.1257,-2.3008,1.1154;-.1645,-2.0728,2.4867;-.7663,-4.3811,2.8575;-.9276,-5.6125,1.0938;.1063,-1.4601,.4605;.0632,-1.0689,2.855;-.9928,-5.2072,3.5373;-.5012,-2.9373,4.4424;1.4316,-1.7597,-3.8582;1.5209,-1.3481,-2.9542;.3188,3.727,-.9506;-2.1081,-3.005,-1.735;-2.9154,-3.1653,-.6053;-3.1182,-2.2785,.313;-3.8305,-.7017,.5473;-4.5931,-.1822,-1.0758;-2.528,.4249,1.2295;-5.1593,-1.0322,1.8227;-3.4126,-4.3703,-.3652;-4.1504,-4.5908,.8276;-3.8511,.1805,-1.8037;-5.3048,.6442,-.8948;-5.1539,-1.0131,-1.5427;-1.6126,.5326,.6159;-2.2087,.0746,2.2259;-2.9806,1.4262,1.3506;-5.6192,-.079,2.1401;-5.965,-1.6758,1.4257;-4.735,-1.5175,2.7208;-5.0815,-4.0002,.8234;-3.5499,-4.3326,1.7141;-4.391,-5.6627,.8297;4.2828,-2.1936,-.1702;4.1446,-3.307,-1.0106;3.5074,-4.4616,-.5723;3.0081,-4.4964,.7238;3.157,-3.424,1.597;3.7901,-2.2744,1.1424;4.4974,-3.2529,-2.0436;3.3706,-5.3145,-1.2369;2.2653,-5.6753,1.1716;2.7513,-3.489,2.6074;3.8854,-1.4187,1.8106;-.4844,4.0096,.1622;-1.8593,3.8181,.1194;-2.4282,3.3462,-1.0578;-1.6636,3.0847,-2.1922;-.2883,3.2692,-2.1288;-.0154,4.3403,1.0916;-2.4877,4.0093,.9902;-3.8698,3.0898,-1.0987;-2.1475,2.7283,-3.1021;.3261,3.0394,-3.0023;2.1602,-5.8627,2.3627;1.7785,-6.3938,.3177;-4.3834,2.9035,-2.1801;-4.4708,3.0584,-.0407;6.5649,.1583,-2.1099;5.893,1.4057,-1.9575;7.7168,.0825,-2.9409;8.1694,1.1857,-3.6212;8.2297,-.8792,-3.0393;9.0523,1.1148,-4.2625;6.3699,2.5224,-2.6995;7.477,2.4152,-3.5066;5.8397,3.4744,-2.6304;7.8221,3.2862,-4.0708;4.5822,3.9022,-.2771;3.7722,5.053,-.0492;5.9464,3.9518,.1262;6.4836,5.0933,.6711;6.5716,3.0653,.0059;7.5344,5.1054,.974;4.3602,6.2238,.5043;5.6881,6.2502,.8511;3.7282,7.1035,.6608;6.1291,7.1544,1.2797;-2.3075,-3.9644,-2.8918;-2.5085,-4.9941,-2.5575;-3.1616,-3.6392,-3.516;-1.4165,-3.976,-3.5397;-1.6554,-1.6237,-2.1228;-2.3831,-1.1484,-2.8055;-1.493,-.9577,-1.2601;-.7037,-1.6762,-2.6725;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662834008239</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002219411280 0.000376181491 0.020752097554 0.005347693858</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056925257 -0.000797448 0.000188962 0.000334234 0.000376481 0.000394395 0.000480189 0.000519779 0.000631289 0.000707633 0.000875205 0.000908807 0.001082069 0.001162651 0.001312926 0.001355953 0.001398431 0.001544965 0.002141066 0.002331468 0.002379171 0.002542083 0.002735615 0.003205875 0.003497091 0.003784573 0.004221985 0.004472855 0.004656245 0.004772302 0.005186430 0.005228385 0.006004365 0.006128366 0.006704553 0.006830106 0.007103793 0.007339011 0.008152165 0.008460990 0.008857159 0.009345606 0.009711917 0.010233145 0.010950184 0.011265592 0.011458048 0.012263407 0.013203105 0.013551086 0.013862580 0.014566194 0.014914704 0.015458656 0.015744803 0.016540885 0.016983855 0.017995098 0.018580198 0.019317032 0.020284392 0.020344300 0.021054469 0.021776175 0.022160523 0.022700647 0.023353985 0.023780552 0.024488877 0.025834550 0.026358157 0.026603279 0.027037972 0.027307462 0.028109531 0.029001974 0.030805964 0.031412587 0.032665642 0.033812334 0.034469537 0.035784435 0.038968992 0.039353966 0.041879691 0.045364522 0.045545513 0.046213852 0.048548681 0.049502492 0.049740198 0.050444594 0.051530237 0.052090388 0.052283448 0.052384710 0.052675105 0.053350459 0.054735658 0.055676301 0.056317228 0.056563234 0.056650740 0.056970776 0.057598776 0.058452565 0.059186605 0.059623697 0.060820612 0.061959594 0.062540251 0.064187714 0.064515263 0.064945691 0.065807290 0.067173381 0.067838376 0.068874979 0.070457506 0.071793109 0.072221443 0.072518617 0.072899939 0.075303351 0.078493454 0.080691214 0.081507170 0.083190789 0.083462472 0.086595119 0.088579116 0.089327322 0.089784771 0.091282876 0.093227536 0.094530447 0.095446017 0.096151874 0.096804756 0.098153997 0.100047691 0.100546207 0.102472587 0.103517636 0.104033447 0.106210529 0.108510543 0.110560839 0.111911857 0.112190194 0.113464903 0.114338394 0.116723105 0.116835704 0.117884561 0.118477620 0.120254630 0.121805963 0.124566483 0.125483747 0.128406677 0.128849251 0.130655491 0.133417207 0.136052455 0.137665882 0.138492422 0.139497802 0.139829515 0.141683113 0.143528258 0.145618244 0.146553050 0.151696066 0.153364301 0.153655589 0.160083972 0.160869518 0.168444580 0.171305867 0.175842393 0.178768150 0.181346684 0.183878007 0.188829757 0.189375739 0.191597390 0.200911808 0.202147471 0.206238385 0.206883777 0.207216858 0.211862806 0.212295317 0.212674453 0.213500033 0.216535605 0.218270381 0.220588870 0.224187711 0.225405014 0.231819871 0.234529607 0.235365449 0.238334845 0.245611948 0.247403317 0.251232737 0.256481774 0.257171038 0.258066309 0.262304759 0.271537067 0.282738888 0.291792333 0.299711441 0.299917435 0.300947598 0.307009180 0.307747796 0.309660033 0.319133088 0.321288308 0.326273006 0.329900864 0.335329890 0.347635333 0.351968448 0.355581344 0.359976339 0.361421480 0.364074738 0.384308107 0.406725329 0.411931373 0.430171585 0.431908797 0.435214694 0.450371423 0.464432244 0.473921901 0.478740541 0.480172900 0.486547210 0.498867814 0.502914514 0.514049551 0.516388409 0.543695868 0.566890940 0.567629572 0.586136551 0.591841385 0.605647677 0.643713069 0.645251151 0.667720705 0.675547406 0.686597797 0.702032849 0.703513366 0.704329384 0.707016251 0.717096857 0.732380537 0.737220242 0.737998198 0.747342788 0.750744577 0.771604284 0.775959199 0.808594201 0.821660928 0.823798275 0.828271171 0.833901365 0.847003736 0.848260225 0.850254639 0.854452699 0.863196694 0.867459188 0.875104621 0.882201108 0.887512371 0.890769164 0.892968154 0.900845468 0.909807519 0.915591334 0.918166168 0.924395673 0.931704882 0.935069118 0.955038443 0.958516542 0.964858824 0.969720495 0.975717185 0.982353294 0.998543762 1.004809867 1.014787768 1.021086144 1.040024796 1.055027105 1.069266077 1.071301513 1.079096209 1.087280584 1.103412087 1.110255576 1.111600743 1.118539728 1.122499860 1.123509651 1.141796580 1.148345957 1.161693705 1.169990866 1.176558680 1.186946233 1.200690949 1.221065769 1.231269660 1.257868455 1.296362091 1.297103383 1.314637567 1.326354891 1.326719883 1.329902101 1.331289965 1.334658213 1.341823940 1.348420729 1.365101442 1.379823757 1.381226800 1.381570250 1.426862933 1.510281911 1.557894318 1.684665234 1.918711289</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">183</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90400841" y3="-0.95391147" z3="-0.70808582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5619945" y3="-1.95099876" z3="-1.62173941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04558203" y3="-0.99746419" z3="-1.47501565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74468919" y3="1.47574605" z3="-1.10284568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27652413" y3="0.31254753" z3="-0.51667309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62564865" y3="2.74066572" z3="-1.11872638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98485647" y3="2.73506426" z3="-0.86015963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38034853" y3="4.99412661" z3="-0.32076289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79152678" y3="3.85657883" z3="-0.82033522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76249643" y3="5.86970861" z3="-0.09784345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0386524" y3="1.61793626" z3="-1.62646124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13878307" y3="0.36533072" z3="0.23562452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70031796" y3="0.38493525" z3="-0.58022676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62130956" y3="0.72356156" z3="0.38073666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63153613" y3="-0.85420524" z3="-1.44473851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10616369" y3="-2.48865378" z3="-1.27808345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.20670953" y3="-5.52035766" z3="-6.18429722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90409194" y3="-5.08372062" z3="-5.22832035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11656676" y3="-3.93674284" z3="-2.80079921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.86846902" y3="-3.70320057" z3="-5.08462358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57258601" y3="-5.90784899" z3="-4.14986634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19388034" y3="-5.32820466" z3="-2.94577122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48364072" y3="-3.0976198" z3="-3.87757176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.13304276" y3="-3.0376641" z3="-5.90995277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62367334" y3="-6.9958177" z3="-4.2394908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97603065" y3="-5.95986872" z3="-2.08042805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67954675" y3="-3.38589299" z3="-1.56918465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33239091" y3="-3.87344281" z3="-0.8432416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66820719" y3="-4.87573421" z3="-1.1215702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39930808" y3="-3.57581334" z3="0.60455471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.48720723" y3="-3.11427899" z3="3.36422765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73568478" y3="-4.61256994" z3="1.48436346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12579579" y3="-2.30409712" z3="1.11783467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16595385" y3="-2.0760689" z3="2.48925335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77091701" y3="-4.38394831" z3="2.85861464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92782438" y3="-5.61745744" z3="1.09547547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1084201" y3="-1.46389407" z3="0.46346178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06256061" y3="-1.07241405" z3="2.85802148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00085567" y3="-5.20907413" z3="3.53720942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50788155" y3="-2.93896617" z3="4.44386157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44184894" y3="-1.76209387" z3="-3.85440192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52132638" y3="-1.3492709" z3="-2.94784193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31691132" y3="3.72637384" z3="-0.94302487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1058252" y3="-3.00890002" z3="-1.73731669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91552372" y3="-3.16564525" z3="-0.6086263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.12032139" y3="-2.27530244" z3="0.30640833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82924624" y3="-0.69842684" z3="0.54007095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.58119001" y3="-0.1726968" z3="-1.08501546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52504325" y3="0.42266142" z3="1.23279366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16818152" y3="-1.02886214" z3="1.80594719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41388968" y3="-4.36958516" z3="-0.36698188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15393909" y3="-4.58733362" z3="0.82457244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.83414247" y3="0.19884903" z3="-1.80468818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.29615452" y3="0.65007639" z3="-0.90405892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.13532255" y3="-1.00236323" z3="-1.55924141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61068922" y3="0.52926576" z3="0.62305417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21298653" y3="0.06689995" z3="2.23115357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97543701" y3="1.4250155" z3="1.35412599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62574501" y3="-0.07315424" z3="2.12071584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97342356" y3="-1.66850264" z3="1.40491291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.7498643" y3="-1.51590699" z3="2.7035763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08295508" y3="-3.99433873" z3="0.81995955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55433906" y3="-4.33129923" z3="1.71139976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39699351" y3="-5.65795621" z3="0.825925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2837881" y3="-2.1932193" z3="-0.17093003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1469116" y3="-3.30940579" z3="-1.00965498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51064213" y3="-4.46409915" z3="-0.56959403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01148776" y3="-4.49654363" z3="0.72683586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15941366" y3="-3.42115307" z3="1.5986237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79138469" y3="-2.27135805" z3="1.14218067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49868597" y3="-3.25686037" z3="-2.04335449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37390816" y3="-5.31840859" z3="-1.23325376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26771279" y3="-5.67451113" z3="1.17586314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75453234" y3="-3.48491708" z3="2.60966523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88470426" y3="-1.41199078" z3="1.80821556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48414315" y3="4.00945983" z3="0.1711355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85915869" y3="3.81911241" z3="0.13101172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43109946" y3="3.35040668" z3="-1.04716559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66841019" y3="3.08800747" z3="-2.18242983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29262868" y3="3.2697957" z3="-2.12040079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01266447" y3="4.33802637" z3="1.10081006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48617506" y3="4.01136386" z3="1.00195663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87330071" y3="3.09709007" z3="-1.08618742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15476128" y3="2.73392056" z3="-3.09245376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32111853" y3="3.03724926" z3="-2.99146737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16157521" y3="-5.8598945" z3="2.36712939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78071835" y3="-6.39382057" z3="0.32267993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39031408" y3="2.91895593" z3="-2.16817275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47201001" y3="3.06126565" z3="-0.0276499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56131288" y3="0.15874928" z3="-2.11554553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88917895" y3="1.40588825" z3="-1.96195578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71135041" y3="0.08322057" z3="-2.94905754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.16151197" y3="1.18629736" z3="-3.63112957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.22461851" y3="-0.8781905" z3="-3.04809892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.04277131" y3="1.11553083" z3="-4.27471753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36362313" y3="2.52256751" z3="-2.70561342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.46863475" y3="2.41549632" z3="-3.51555434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83308429" y3="3.47440757" z3="-2.63534794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.81172701" y3="3.28635364" z3="-4.08128622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58172868" y3="3.90212371" z3="-0.27876381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77190022" y3="5.05269734" z3="-0.04841716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94706678" y3="3.95204823" z3="0.12091138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48536758" y3="5.09358593" z3="0.66457469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57234857" y3="3.06555646" z3="-0.00154917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.537058" y3="5.10587914" z3="0.96463578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36096683" y3="6.22369062" z3="0.50374114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6899097" y3="6.25028967" z3="0.84698141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7292815" y3="7.1032499" z3="0.66172982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13178362" y3="7.1546176" z3="1.27450709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30442171" y3="-3.96999398" z3="-2.89235651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50847487" y3="-4.99824861" z3="-2.55708871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15640603" y3="-3.64441354" z3="-3.51885494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41184611" y3="-3.98466449" z3="-3.53801425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65297641" y3="-1.62770071" z3="-2.12766115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37935943" y3="-1.15215141" z3="-2.8110669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4900876" y3="-0.96138621" z3="-1.26550345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69741078" y3="-1.68307912" z3="-2.67477298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.904,-.9539,-.7081;6.562,-1.951,-1.6217;6.0456,-.9975,-1.475;4.7447,1.4757,-1.1028;4.2765,.3125,-.5167;2.6256,2.7407,-1.1187;3.9849,2.7351,-.8602;2.3803,4.9941,-.3208;1.7915,3.8566,-.8203;1.7625,5.8697,-.0978;2.0387,1.6179,-1.6265;3.1388,.3653,.2356;1.7003,.3849,-.5802;.6213,.7236,.3807;1.6315,-.8542,-1.4447;1.1062,-2.4887,-1.2781;2.2067,-5.5204,-6.1843;1.9041,-5.0837,-5.2283;1.1166,-3.9367,-2.8008;1.8685,-3.7032,-5.0846;1.5726,-5.9078,-4.1499;1.1939,-5.3282,-2.9458;1.4836,-3.0976,-3.8776;2.133,-3.0377,-5.91;1.6237,-6.9958,-4.2395;.976,-5.9599,-2.0804;.6795,-3.3859,-1.5692;-.3324,-3.8734,-.8432;-.6682,-4.8757,-1.1216;-.3993,-3.5758,.6046;-.4872,-3.1143,3.3642;-.7357,-4.6126,1.4844;-.1258,-2.3041,1.1178;-.166,-2.0761,2.4893;-.7709,-4.3839,2.8586;-.9278,-5.6175,1.0955;.1084,-1.4639,.4635;.0626,-1.0724,2.858;-1.0009,-5.2091,3.5372;-.5079,-2.939,4.4439;1.4418,-1.7621,-3.8544;1.5213,-1.3493,-2.9478;.3169,3.7264,-.943;-2.1058,-3.0089,-1.7373;-2.9155,-3.1656,-.6086;-3.1203,-2.2753,.3064;-3.8292,-.6984,.5401;-4.5812,-.1727,-1.085;-2.525,.4227,1.2328;-5.1682,-1.0289,1.8059;-3.4139,-4.3696,-.367;-4.1539,-4.5873,.8246;-3.8341,.1988,-1.8047;-5.2962,.6501,-.9041;-5.1353,-1.0024,-1.5592;-1.6107,.5293,.6231;-2.213,.0669,2.2312;-2.9754,1.425,1.3541;-5.6257,-.0732,2.1207;-5.9734,-1.6685,1.4049;-4.7499,-1.5159,2.7036;-5.083,-3.9943,.82;-3.5543,-4.3313,1.7114;-4.397,-5.658,.8259;4.2838,-2.1932,-.1709;4.1469,-3.3094,-1.0097;3.5106,-4.4641,-.5696;3.0115,-4.4965,.7268;3.1594,-3.4212,1.5986;3.7914,-2.2714,1.1422;4.4987,-3.2569,-2.0434;3.3739,-5.3184,-1.2333;2.2677,-5.6745,1.1759;2.7545,-3.4849,2.6097;3.8847,-1.412,1.8082;-.4841,4.0095,.1711;-1.8592,3.8191,.131;-2.4311,3.3504,-1.0472;-1.6684,3.088,-2.1824;-.2926,3.2698,-2.1204;-.0127,4.338,1.1008;-2.4862,4.0114,1.002;-3.8733,3.0971,-1.0862;-2.1548,2.7339,-3.0925;.3211,3.0372,-2.9915;2.1616,-5.8599,2.3671;1.7807,-6.3938,.3227;-4.3903,2.919,-2.1682;-4.472,3.0613,-.0276;6.5613,.1587,-2.1155;5.8892,1.4059,-1.962;7.7114,.0832,-2.9491;8.1615,1.1863,-3.6311;8.2246,-.8782,-3.0481;9.0428,1.1155,-4.2747;6.3636,2.5226,-2.7056;7.4686,2.4155,-3.5156;5.8331,3.4744,-2.6353;7.8117,3.2864,-4.0813;4.5817,3.9021,-.2788;3.7719,5.0527,-.0484;5.9471,3.952,.1209;6.4854,5.0936,.6646;6.5723,3.0656,-.0015;7.5371,5.1059,.9646;4.361,6.2237,.5037;5.6899,6.2503,.847;3.7293,7.1032,.6617;6.1318,7.1546,1.2745;-2.3044,-3.97,-2.8924;-2.5085,-4.9982,-2.5571;-3.1564,-3.6444,-3.5189;-1.4118,-3.9847,-3.538;-1.653,-1.6277,-2.1277;-2.3794,-1.1522,-2.8111;-1.4901,-.9614,-1.2655;-.6974,-1.6831,-2.6748;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662822905220</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002106409343 0.000355318062 0.026551263132 0.005376988264</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056924929 -0.000781926 0.000189090 0.000330982 0.000376321 0.000393467 0.000480680 0.000519545 0.000631543 0.000707410 0.000875717 0.000908803 0.001082073 0.001162675 0.001312439 0.001356116 0.001401851 0.001545088 0.002141161 0.002337251 0.002378798 0.002543297 0.002770788 0.003210938 0.003500648 0.003786059 0.004232024 0.004472854 0.004655625 0.004775227 0.005196949 0.005229400 0.006012662 0.006141806 0.006707937 0.006829919 0.007103797 0.007339338 0.008154727 0.008465291 0.008858938 0.009345717 0.009711851 0.010243943 0.010953659 0.011266373 0.011459298 0.012265736 0.013204612 0.013553598 0.013875694 0.014571495 0.014914986 0.015460338 0.015745735 0.016542248 0.016983978 0.018044052 0.018620435 0.019316924 0.020284192 0.020366015 0.021055783 0.021776106 0.022180783 0.022701099 0.023355556 0.023780287 0.024489040 0.025836053 0.026365957 0.026603479 0.027038070 0.027312156 0.028109404 0.029001715 0.030808498 0.031412795 0.032667538 0.033819570 0.034491542 0.035787067 0.038969379 0.039361433 0.041886268 0.045364172 0.045553376 0.046289290 0.048551089 0.049515139 0.049740686 0.050478809 0.051531095 0.052096671 0.052283446 0.052384866 0.052679668 0.053350462 0.054747621 0.055712115 0.056318687 0.056571945 0.056651789 0.056973063 0.057608965 0.058452576 0.059188945 0.059631939 0.060839614 0.061959932 0.062576698 0.064188164 0.064517254 0.064948605 0.065809041 0.067179630 0.067843719 0.068878525 0.070462342 0.071797902 0.072278013 0.072518988 0.072903005 0.075311780 0.078493692 0.080692492 0.081511214 0.083197059 0.083498989 0.086594664 0.088579620 0.089327159 0.089785553 0.091282877 0.093229389 0.094546163 0.095447044 0.096151946 0.096807976 0.098155974 0.100052598 0.100550241 0.102473710 0.103554713 0.104036565 0.106216608 0.108512560 0.110566958 0.111912534 0.112190452 0.113477456 0.114346814 0.116733927 0.116856217 0.117910375 0.118477320 0.120254738 0.121806111 0.124592592 0.125508401 0.128407895 0.128849261 0.130669782 0.133417340 0.136052650 0.137666319 0.138501626 0.139570824 0.139852065 0.141685104 0.143528619 0.145638416 0.146626298 0.151701634 0.153366961 0.153762936 0.160098424 0.160884191 0.168449019 0.171305907 0.175852149 0.178771879 0.181346414 0.183878208 0.188829651 0.189400446 0.191599002 0.200920690 0.202149147 0.206239612 0.206883805 0.207219077 0.211885454 0.212318906 0.212739050 0.213503213 0.216536944 0.218270479 0.220589142 0.224190598 0.225406275 0.231821921 0.234530307 0.235372754 0.238335955 0.245748224 0.247470996 0.251255154 0.256490053 0.257171909 0.258066187 0.262313765 0.271538136 0.282742291 0.291797359 0.299711651 0.299917841 0.300948360 0.307009443 0.307750912 0.309688218 0.319177432 0.321302808 0.326274126 0.329901326 0.335355343 0.347635894 0.351968831 0.355582423 0.360087254 0.361421929 0.364074852 0.384320408 0.406729447 0.411931295 0.430171596 0.431921019 0.435213662 0.450378964 0.464436820 0.473957731 0.478744883 0.480185785 0.486552946 0.498870673 0.503013469 0.514056538 0.516389929 0.543696198 0.566893647 0.567633579 0.586148446 0.591841748 0.605647593 0.643720660 0.645251601 0.667722199 0.675547911 0.686685933 0.702340584 0.703564754 0.704329639 0.707030281 0.717096933 0.732503582 0.737223937 0.737998449 0.747346633 0.750744964 0.771604324 0.775959952 0.808595154 0.821662839 0.823819642 0.828312377 0.833902342 0.847013292 0.848400409 0.850306599 0.854452827 0.863208309 0.867459210 0.875114383 0.882255721 0.887518804 0.890852998 0.893058032 0.900846392 0.909834416 0.915593171 0.918274250 0.924395937 0.931705653 0.935077049 0.955121989 0.958873154 0.964888625 0.969746311 0.975775225 0.982355915 0.998544937 1.004934519 1.014792055 1.021101604 1.040024808 1.055027317 1.069283853 1.071303187 1.079123683 1.087282257 1.103416037 1.110256201 1.111600976 1.118545766 1.122500345 1.123510229 1.141796598 1.148371386 1.161694678 1.169998687 1.176563754 1.186946686 1.200698745 1.221084096 1.231288637 1.257869166 1.296364022 1.297216482 1.314638108 1.326354799 1.326719841 1.329904807 1.331313511 1.334659360 1.341853759 1.348441757 1.365140679 1.379851245 1.381242129 1.381570304 1.426960761 1.510278500 1.557895111 1.684672060 1.918839076</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">184</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90431266" y3="-0.95428759" z3="-0.7090846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56047802" y3="-1.95100488" z3="-1.62673565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04400347" y3="-0.99763798" z3="-1.47905723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74304495" y3="1.47525463" z3="-1.10501608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27668725" y3="0.31211967" z3="-0.51724519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62333913" y3="2.73995976" z3="-1.11542403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98339372" y3="2.73446934" z3="-0.86045581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37993506" y3="4.99342672" z3="-0.31736314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78993833" y3="3.85579901" z3="-0.81521345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7626233" y3="5.86887635" z3="-0.09366289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03476669" y3="1.61733525" z3="-1.62180049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14058582" y3="0.36535012" z3="0.23748367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70027488" y3="0.38365453" z3="-0.57498849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62335519" y3="0.72102169" z3="0.38896879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63054903" y3="-0.85536227" z3="-1.43959442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1066456" y3="-2.49010607" z3="-1.27567763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.21317367" y3="-5.52049385" z3="-6.18149017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90980246" y3="-5.08423086" z3="-5.22553851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11971947" y3="-3.93855796" z3="-2.79824245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.87429479" y3="-3.70366324" z3="-5.08098803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57701261" y3="-5.90897385" z3="-4.14796535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19720026" y3="-5.32998952" z3="-2.94389823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48780456" y3="-3.09867479" z3="-3.87406849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.14005995" y3="-3.0378908" z3="-5.9057988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62791952" y3="-6.99695617" z3="-4.2382133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97852773" y3="-5.96210247" z3="-2.07907744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68172382" y3="-3.3887636" z3="-1.56656034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3307868" y3="-3.87644111" z3="-0.84210023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66616823" y3="-4.87860516" z3="-1.12113952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39994007" y3="-3.57847033" z3="0.60543293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49162438" y3="-3.11742649" z3="3.36482735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73849064" y3="-4.61480889" z3="1.48468054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12668872" y3="-2.30683979" z3="1.1189355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17026582" y3="-2.0780874" z3="2.48993728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77538288" y3="-4.38654881" z3="2.858782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93381462" y3="-5.61663437" z3="1.09395002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10874555" y3="-1.46659361" z3="0.46483082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05708683" y3="-1.07420145" z3="2.85894263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00456281" y3="-5.21248537" z3="3.53831628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51484525" y3="-2.94165332" z3="4.44426401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44507355" y3="-1.76297936" z3="-3.84906867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52830498" y3="-1.35179773" z3="-2.94451668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31490168" y3="3.72616939" z3="-0.93458756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10380253" y3="-3.01173375" z3="-1.73814219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91425425" y3="-3.16676373" z3="-0.60988807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11753358" y3="-2.27656364" z3="0.30482318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82725151" y3="-0.69698023" z3="0.53276677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.56570638" y3="-0.16751925" z3="-1.09878213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52727979" y3="0.41996798" z3="1.2344031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.17480155" y3="-1.0235007" z3="1.78852125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41412751" y3="-4.37013997" z3="-0.36634649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15572307" y3="-4.58432315" z3="0.82527368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.81428593" y3="0.20974805" z3="-1.80958671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28793993" y3="0.65047569" z3="-0.92067082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.11121481" y3="-0.99795483" z3="-1.58428491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60507699" y3="0.52506385" z3="0.63049759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22079826" y3="0.06416053" z3="2.2326002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97540278" y3="1.42344076" z3="1.35456918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.63452947" y3="-0.0686473" z3="2.10172393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97804218" y3="-1.66201106" z3="1.37836165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.7657589" y3="-1.51309545" z3="2.69147251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08392355" y3="-3.98965698" z3="0.81788656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55626227" y3="-4.32650186" z3="1.71253725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40088132" y3="-5.6549986" z3="0.82915854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28555564" y3="-2.19365698" z3="-0.17008099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14866534" y3="-3.3101335" z3="-1.00767293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51189056" y3="-4.46391951" z3="-0.56677424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01165365" y3="-4.49480564" z3="0.72918928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16021086" y3="-3.41963985" z3="1.60007614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79291847" y3="-2.27090806" z3="1.14291324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50161982" y3="-3.25928448" z3="-2.04101643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37536286" y3="-5.31863676" z3="-1.22961739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26806833" y3="-5.67252057" z3="1.1793358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75439056" y3="-3.48180683" z3="2.61083172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88748911" y3="-1.41305917" z3="1.80907658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48381967" y3="4.00898851" z3="0.18153426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85959158" y3="3.82183332" z3="0.14253945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43384212" y3="3.35469608" z3="-1.03414617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67352691" y3="3.09209322" z3="-2.17120224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29727396" y3="3.27124975" z3="-2.11134491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01079586" y3="4.33706396" z3="1.10994903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48439802" y3="4.01354696" z3="1.01594938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87680184" y3="3.10511482" z3="-1.07201452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16162207" y3="2.73945156" z3="-3.08044987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.31384562" y3="3.04047228" z3="-2.9866932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16178308" y3="-5.85684047" z3="2.3709066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7818185" y3="-6.39300232" z3="0.32677801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39574464" y3="2.93397826" z3="-2.15319965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47326742" y3="3.06323122" z3="-0.01196263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5577837" y3="0.15848357" z3="-2.12144406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88564612" y3="1.40551134" z3="-1.9666983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70601846" y3="0.08301637" z3="-2.95751214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.15454728" y3="1.18614562" z3="-3.64051348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21930684" y3="-0.87832921" z3="-3.05756723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.03451009" y3="1.1154876" z3="-4.28582712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.35825954" y3="2.52216746" z3="-2.71151072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.46165754" y3="2.4152548" z3="-3.52358152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82762367" y3="3.47386708" z3="-2.64037323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.80345351" y3="3.28618434" z3="-4.0899248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5815554" y3="3.90172602" z3="-0.28058672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7721645" y3="5.05216423" z3="-0.04858277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94778502" y3="3.95218661" z3="0.11581533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48709912" y3="5.09403531" z3="0.65780789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57290836" y3="3.06599215" z3="-0.00731695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53936736" y3="5.10675405" z3="0.95546116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36227633" y3="6.22343424" z3="0.50164631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69195877" y3="6.25054777" z3="0.84160702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73062419" y3="7.10276271" z3="0.66100768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13457773" y3="7.15510887" z3="1.26778028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30220612" y3="-3.97360142" z3="-2.89218869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50446161" y3="-5.00217294" z3="-2.55567988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1553582" y3="-3.64986471" z3="-3.51815664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41007543" y3="-3.98689779" z3="-3.53814904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64816132" y3="-1.63241458" z3="-2.12805798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37456827" y3="-1.15692725" z3="-2.81166388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48503769" y3="-0.96561163" z3="-1.26607974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69529767" y3="-1.68748361" z3="-2.67632744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9043,-.9543,-.7091;6.5605,-1.951,-1.6267;6.044,-.9976,-1.4791;4.743,1.4753,-1.105;4.2767,.3121,-.5172;2.6233,2.74,-1.1154;3.9834,2.7345,-.8605;2.3799,4.9934,-.3174;1.7899,3.8558,-.8152;1.7626,5.8689,-.0937;2.0348,1.6173,-1.6218;3.1406,.3654,.2375;1.7003,.3837,-.575;.6234,.721,.389;1.6305,-.8554,-1.4396;1.1066,-2.4901,-1.2757;2.2132,-5.5205,-6.1815;1.9098,-5.0842,-5.2255;1.1197,-3.9386,-2.7982;1.8743,-3.7037,-5.081;1.577,-5.909,-4.148;1.1972,-5.33,-2.9439;1.4878,-3.0987,-3.8741;2.1401,-3.0379,-5.9058;1.6279,-6.997,-4.2382;.9785,-5.9621,-2.0791;.6817,-3.3888,-1.5666;-.3308,-3.8764,-.8421;-.6662,-4.8786,-1.1211;-.3999,-3.5785,.6054;-.4916,-3.1174,3.3648;-.7385,-4.6148,1.4847;-.1267,-2.3068,1.1189;-.1703,-2.0781,2.4899;-.7754,-4.3865,2.8588;-.9338,-5.6166,1.094;.1087,-1.4666,.4648;.0571,-1.0742,2.8589;-1.0046,-5.2125,3.5383;-.5148,-2.9417,4.4443;1.4451,-1.763,-3.8491;1.5283,-1.3518,-2.9445;.3149,3.7262,-.9346;-2.1038,-3.0117,-1.7381;-2.9143,-3.1668,-.6099;-3.1175,-2.2766,.3048;-3.8273,-.697,.5328;-4.5657,-.1675,-1.0988;-2.5273,.42,1.2344;-5.1748,-1.0235,1.7885;-3.4141,-4.3701,-.3663;-4.1557,-4.5843,.8253;-3.8143,.2097,-1.8096;-5.2879,.6505,-.9207;-5.1112,-.998,-1.5843;-1.6051,.5251,.6305;-2.2208,.0642,2.2326;-2.9754,1.4234,1.3546;-5.6345,-.0686,2.1017;-5.978,-1.662,1.3784;-4.7658,-1.5131,2.6915;-5.0839,-3.9897,.8179;-3.5563,-4.3265,1.7125;-4.4009,-5.655,.8292;4.2856,-2.1937,-.1701;4.1487,-3.3101,-1.0077;3.5119,-4.4639,-.5668;3.0117,-4.4948,.7292;3.1602,-3.4196,1.6001;3.7929,-2.2709,1.1429;4.5016,-3.2593,-2.041;3.3754,-5.3186,-1.2296;2.2681,-5.6725,1.1793;2.7544,-3.4818,2.6108;3.8875,-1.4131,1.8091;-.4838,4.009,.1815;-1.8596,3.8218,.1425;-2.4338,3.3547,-1.0341;-1.6735,3.0921,-2.1712;-.2973,3.2712,-2.1113;-.0108,4.3371,1.1099;-2.4844,4.0135,1.0159;-3.8768,3.1051,-1.072;-2.1616,2.7395,-3.0804;.3138,3.0405,-2.9867;2.1618,-5.8568,2.3709;1.7818,-6.393,.3268;-4.3957,2.934,-2.1532;-4.4733,3.0632,-.012;6.5578,.1585,-2.1214;5.8856,1.4055,-1.9667;7.706,.083,-2.9575;8.1545,1.1861,-3.6405;8.2193,-.8783,-3.0576;9.0345,1.1155,-4.2858;6.3583,2.5222,-2.7115;7.4617,2.4153,-3.5236;5.8276,3.4739,-2.6404;7.8035,3.2862,-4.0899;4.5816,3.9017,-.2806;3.7722,5.0522,-.0486;5.9478,3.9522,.1158;6.4871,5.094,.6578;6.5729,3.066,-.0073;7.5394,5.1068,.9555;4.3623,6.2234,.5016;5.692,6.2505,.8416;3.7306,7.1028,.661;6.1346,7.1551,1.2678;-2.3022,-3.9736,-2.8922;-2.5045,-5.0022,-2.5557;-3.1554,-3.6499,-3.5182;-1.4101,-3.9869,-3.5381;-1.6482,-1.6324,-2.1281;-2.3746,-1.1569,-2.8117;-1.485,-.9656,-1.2661;-.6953,-1.6875,-2.6763;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662809565847</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002296833895 0.000387100103 0.023650447320 0.005355822712</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056924721 -0.000844332 0.000188818 0.000326761 0.000373862 0.000393373 0.000480656 0.000519027 0.000633298 0.000709831 0.000877342 0.000909185 0.001085178 0.001162768 0.001315205 0.001356968 0.001400234 0.001545067 0.002159308 0.002337964 0.002391617 0.002544467 0.002788802 0.003220569 0.003499971 0.003787653 0.004242806 0.004473808 0.004659061 0.004774645 0.005200690 0.005229560 0.006037022 0.006160109 0.006716418 0.006830020 0.007103885 0.007339258 0.008156602 0.008465601 0.008858793 0.009345750 0.009711878 0.010260393 0.010953791 0.011264232 0.011459295 0.012267792 0.013205596 0.013556167 0.013883653 0.014573304 0.014915026 0.015462159 0.015746374 0.016542077 0.016984020 0.018111502 0.018661184 0.019318022 0.020287758 0.020370251 0.021055980 0.021778101 0.022198355 0.022701151 0.023356915 0.023781827 0.024489277 0.025836963 0.026378062 0.026603340 0.027038088 0.027313227 0.028109582 0.029001813 0.030809833 0.031413231 0.032671367 0.033836190 0.034514652 0.035791053 0.038972907 0.039362259 0.041896198 0.045363968 0.045561741 0.046392675 0.048552990 0.049528400 0.049746065 0.050504293 0.051532009 0.052099726 0.052283464 0.052385018 0.052682436 0.053350572 0.054754928 0.055752246 0.056320125 0.056587076 0.056651755 0.056974872 0.057620122 0.058452631 0.059191633 0.059642962 0.060850634 0.061962648 0.062604658 0.064188508 0.064517735 0.064949147 0.065811802 0.067185130 0.067848393 0.068878730 0.070475971 0.071801768 0.072316972 0.072519001 0.072904402 0.075313120 0.078496501 0.080693422 0.081511450 0.083201680 0.083549442 0.086595054 0.088579662 0.089327888 0.089786091 0.091282817 0.093230052 0.094550889 0.095449330 0.096152809 0.096809218 0.098156086 0.100053318 0.100549620 0.102481993 0.103562376 0.104040202 0.106220580 0.108517459 0.110567073 0.111913468 0.112193793 0.113487354 0.114356602 0.116745346 0.116879414 0.117929442 0.118477166 0.120255868 0.121806029 0.124624026 0.125521648 0.128407861 0.128849329 0.130674778 0.133419811 0.136052719 0.137666376 0.138528642 0.139597847 0.139882812 0.141691681 0.143528697 0.145650185 0.146634346 0.151700874 0.153365050 0.153846472 0.160105243 0.160898883 0.168452404 0.171306428 0.175856927 0.178775218 0.181347793 0.183878410 0.188829582 0.189437703 0.191600185 0.200929526 0.202149201 0.206241558 0.206883920 0.207220728 0.211919257 0.212363935 0.212847922 0.213511218 0.216536851 0.218271743 0.220589114 0.224194284 0.225407156 0.231822326 0.234530515 0.235375333 0.238336762 0.245818996 0.247524630 0.251306148 0.256492653 0.257172849 0.258075409 0.262319116 0.271539988 0.282745831 0.291799720 0.299712394 0.299918119 0.300949321 0.307009618 0.307754843 0.309712695 0.319225651 0.321309796 0.326274534 0.329901698 0.335378182 0.347636594 0.351968926 0.355582848 0.360191132 0.361425202 0.364075298 0.384327664 0.406731946 0.411931591 0.430171512 0.431946700 0.435216359 0.450402067 0.464442588 0.473994110 0.478749064 0.480205297 0.486561588 0.498872708 0.503113726 0.514061296 0.516395100 0.543696454 0.566895966 0.567637416 0.586177751 0.591843249 0.605648040 0.643723705 0.645251615 0.667731405 0.675550101 0.686769930 0.702772299 0.703636810 0.704333457 0.707093251 0.717096964 0.732616216 0.737226994 0.737998525 0.747346329 0.750745502 0.771604341 0.775960370 0.808595792 0.821664240 0.823831185 0.828363604 0.833903067 0.847016031 0.848522188 0.850388475 0.854453056 0.863215067 0.867459266 0.875121788 0.882311859 0.887524777 0.890899720 0.893098672 0.900846491 0.909852290 0.915600222 0.918440858 0.924396663 0.931707431 0.935084038 0.955220185 0.959211941 0.964923250 0.969780987 0.975844222 0.982356788 0.998545036 1.005064239 1.014798660 1.021105007 1.040024846 1.055027369 1.069302926 1.071337451 1.079138431 1.087282947 1.103420046 1.110256399 1.111600965 1.118550544 1.122500819 1.123511219 1.141796746 1.148413447 1.161696485 1.170002282 1.176569812 1.186948977 1.200705152 1.221088099 1.231307960 1.257869592 1.296366607 1.297338846 1.314639800 1.326355593 1.326721403 1.329909234 1.331313457 1.334659453 1.341873785 1.348467792 1.365169447 1.379856503 1.381246107 1.381570643 1.427059166 1.510276035 1.557895248 1.684676416 1.919001413</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">185</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90401611" y3="-0.95377483" z3="-0.70855774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55931055" y3="-1.95032082" z3="-1.62759145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04261486" y3="-0.99711738" z3="-1.47988743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7410632" y3="1.47533784" z3="-1.10581823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27603137" y3="0.31237819" z3="-0.51662206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62148649" y3="2.73985531" z3="-1.11299471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9818666" y3="2.73454247" z3="-0.86057173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37980299" y3="4.99369078" z3="-0.31506962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78871305" y3="3.8558304" z3="-0.8112423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76292612" y3="5.86935831" z3="-0.0899107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03222138" y3="1.61705475" z3="-1.61785451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14106647" y3="0.36524328" z3="0.23974102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69943703" y3="0.38353582" z3="-0.57043676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62391029" y3="0.72087538" z3="0.39474516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62807317" y3="-0.85546005" z3="-1.43501004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10773983" y3="-2.4922998" z3="-1.27235562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.21873326" y3="-5.5197053" z3="-6.17940103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.91468852" y3="-5.08412932" z3="-5.22336278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12291146" y3="-3.93978875" z3="-2.79584964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.8798347" y3="-3.70381748" z3="-5.07778156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58061899" y3="-5.90947206" z3="-4.14661929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19980234" y3="-5.33113654" z3="-2.94255514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49316059" y3="-3.09950293" z3="-3.87061521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.1464579" y3="-3.0373293" z3="-5.90166965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63130947" y3="-6.99736162" z3="-4.23759299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9799898" y3="-5.96379033" z3="-2.07843754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68342791" y3="-3.39039501" z3="-1.56447419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32978995" y3="-3.8789121" z3="-0.84109684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66421377" y3="-4.88126348" z3="-1.12040461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40114901" y3="-3.58085157" z3="0.60624363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49464997" y3="-3.11872898" z3="3.3657299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74091958" y3="-4.61669454" z3="1.48559233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1278916" y3="-2.30939399" z3="1.11973813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17062249" y3="-2.08110623" z3="2.49103133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77901576" y3="-4.38757264" z3="2.85969996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93190427" y3="-5.62271045" z3="1.09720983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10855693" y3="-1.46984773" z3="0.46531219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05769556" y3="-1.07742117" z3="2.85956438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.01156328" y3="-5.21205822" z3="3.53795451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51730605" y3="-2.94352636" z3="4.44530844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45317779" y3="-1.76399036" z3="-3.84595018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52743855" y3="-1.3516838" z3="-2.93863239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31342966" y3="3.72672621" z3="-0.92785562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10210536" y3="-3.01620706" z3="-1.74064819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91344608" y3="-3.16742317" z3="-0.61237158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11811888" y3="-2.27228107" z3="0.29809543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82590757" y3="-0.69406272" z3="0.52514435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.5531235" y3="-0.16009856" z3="-1.10824484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52600295" y3="0.41819049" z3="1.23978076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18632308" y3="-1.02149355" z3="1.76957974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4142773" y3="-4.36941753" z3="-0.36603004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15503304" y3="-4.5812205" z3="0.82657329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.79635767" y3="0.22514202" z3="-1.81027906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27931257" y3="0.6538715" z3="-0.93232364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.09012967" y3="-0.99001448" z3="-1.60121274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60375685" y3="0.52169368" z3="0.64152428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22942576" y3="0.057372" z3="2.24145584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97313067" y3="1.42212848" z3="1.35863217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.6431288" y3="-0.06376647" z3="2.07940156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98881599" y3="-1.65547204" z3="1.3547112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.78447539" y3="-1.5130461" z3="2.67210497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08215111" y3="-3.98525348" z3="0.82017361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55407048" y3="-4.32454346" z3="1.71253413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40203824" y3="-5.65116122" z3="0.83168116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28627388" y3="-2.19319385" z3="-0.16867436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14751379" y3="-3.30892169" z3="-1.00655793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51139139" y3="-4.46299925" z3="-0.56502793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01321243" y3="-4.49489949" z3="0.73159246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16393496" y3="-3.42049786" z3="1.60286553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79672106" y3="-2.27177054" z3="1.1453213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49782979" y3="-3.25667811" z3="-2.04056263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37348726" y3="-5.31708252" z3="-1.22800725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26771514" y3="-5.67124987" z3="1.1812473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76004442" y3="-3.48364383" z3="2.61421922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.89295571" y3="-1.41407082" z3="1.81178622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48302373" y3="4.01011664" z3="0.18949196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85861918" y3="3.82312057" z3="0.15427258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43589235" y3="3.35835406" z3="-1.02267129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67782997" y3="3.09542194" z3="-2.16101961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30129386" y3="3.27275931" z3="-2.10347436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0075514" y3="4.33672329" z3="1.11773631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48193013" y3="4.01580067" z3="1.02777519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87899531" y3="3.11067233" z3="-1.0575375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16832123" y3="2.74459423" z3="-3.0700341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30879138" y3="3.03990619" z3="-2.97717478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1599991" y3="-5.8549694" z3="2.3725141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78098671" y3="-6.39096593" z3="0.32839788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40167916" y3="2.94818342" z3="-2.13939709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47286284" y3="3.06366911" z3="0.00341074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55466991" y3="0.1586941" z3="-2.12417017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88213886" y3="1.4054168" z3="-1.96948027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70126185" y3="0.08301904" z3="-2.96247825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.14781966" y3="1.1856071" z3="-3.64775346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21476651" y3="-0.87813025" z3="-3.0625931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.02645093" y3="1.11474427" z3="-4.29495097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.35273486" y3="2.52154059" z3="-2.71647195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.4545347" y3="2.41438805" z3="-3.53078011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82175082" y3="3.47299276" z3="-2.64533023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.7947373" y3="3.28485514" z3="-4.09888929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58133998" y3="3.90200744" z3="-0.28255761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77257995" y3="5.0526527" z3="-0.04932986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94852797" y3="3.95245943" z3="0.11076355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48940579" y3="5.09461018" z3="0.65061511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57329789" y3="3.06592922" z3="-0.01356297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54254791" y3="5.10731645" z3="0.94562794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3641549" y3="6.22424806" z3="0.49889062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69477796" y3="6.25141407" z3="0.83559133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73305785" y3="7.10384949" z3="0.65922463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13866629" y3="7.15625379" z3="1.25996832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30021653" y3="-3.98238004" z3="-2.89209761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50537637" y3="-5.00909536" z3="-2.55230577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15118857" y3="-3.65893376" z3="-3.52106347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40715016" y3="-4.00082079" z3="-3.53730081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6466938" y3="-1.63687851" z3="-2.13558117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37218148" y3="-1.16186872" z3="-2.82052921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4822034" y3="-0.96836284" z3="-1.27529364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69176238" y3="-1.69544284" z3="-2.68262449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.904,-.9538,-.7086;6.5593,-1.9503,-1.6276;6.0426,-.9971,-1.4799;4.7411,1.4753,-1.1058;4.276,.3124,-.5166;2.6215,2.7399,-1.113;3.9819,2.7345,-.8606;2.3798,4.9937,-.3151;1.7887,3.8558,-.8112;1.7629,5.8694,-.0899;2.0322,1.6171,-1.6179;3.1411,.3652,.2397;1.6994,.3835,-.5704;.6239,.7209,.3947;1.6281,-.8555,-1.435;1.1077,-2.4923,-1.2724;2.2187,-5.5197,-6.1794;1.9147,-5.0841,-5.2234;1.1229,-3.9398,-2.7958;1.8798,-3.7038,-5.0778;1.5806,-5.9095,-4.1466;1.1998,-5.3311,-2.9426;1.4932,-3.0995,-3.8706;2.1465,-3.0373,-5.9017;1.6313,-6.9974,-4.2376;.98,-5.9638,-2.0784;.6834,-3.3904,-1.5645;-.3298,-3.8789,-.8411;-.6642,-4.8813,-1.1204;-.4011,-3.5809,.6062;-.4946,-3.1187,3.3657;-.7409,-4.6167,1.4856;-.1279,-2.3094,1.1197;-.1706,-2.0811,2.491;-.779,-4.3876,2.8597;-.9319,-5.6227,1.0972;.1086,-1.4698,.4653;.0577,-1.0774,2.8596;-1.0116,-5.2121,3.538;-.5173,-2.9435,4.4453;1.4532,-1.764,-3.846;1.5274,-1.3517,-2.9386;.3134,3.7267,-.9279;-2.1021,-3.0162,-1.7406;-2.9134,-3.1674,-.6124;-3.1181,-2.2723,.2981;-3.8259,-.6941,.5251;-4.5531,-.1601,-1.1082;-2.526,.4182,1.2398;-5.1863,-1.0215,1.7696;-3.4143,-4.3694,-.366;-4.155,-4.5812,.8266;-3.7964,.2251,-1.8103;-5.2793,.6539,-.9323;-5.0901,-.99,-1.6012;-1.6038,.5217,.6415;-2.2294,.0574,2.2415;-2.9731,1.4221,1.3586;-5.6431,-.0638,2.0794;-5.9888,-1.6555,1.3547;-4.7845,-1.513,2.6721;-5.0822,-3.9853,.8202;-3.5541,-4.3245,1.7125;-4.402,-5.6512,.8317;4.2863,-2.1932,-.1687;4.1475,-3.3089,-1.0066;3.5114,-4.463,-.565;3.0132,-4.4949,.7316;3.1639,-3.4205,1.6029;3.7967,-2.2718,1.1453;4.4978,-3.2567,-2.0406;3.3735,-5.3171,-1.228;2.2677,-5.6712,1.1812;2.76,-3.4836,2.6142;3.893,-1.4141,1.8118;-.483,4.0101,.1895;-1.8586,3.8231,.1543;-2.4359,3.3584,-1.0227;-1.6778,3.0954,-2.161;-.3013,3.2728,-2.1035;-.0076,4.3367,1.1177;-2.4819,4.0158,1.0278;-3.879,3.1107,-1.0575;-2.1683,2.7446,-3.07;.3088,3.0399,-2.9772;2.16,-5.855,2.3725;1.781,-6.391,.3284;-4.4017,2.9482,-2.1394;-4.4729,3.0637,.0034;6.5547,.1587,-2.1242;5.8821,1.4054,-1.9695;7.7013,.083,-2.9625;8.1478,1.1856,-3.6478;8.2148,-.8781,-3.0626;9.0265,1.1147,-4.295;6.3527,2.5215,-2.7165;7.4545,2.4144,-3.5308;5.8218,3.473,-2.6453;7.7947,3.2849,-4.0989;4.5813,3.902,-.2826;3.7726,5.0527,-.0493;5.9485,3.9525,.1108;6.4894,5.0946,.6506;6.5733,3.0659,-.0136;7.5425,5.1073,.9456;4.3642,6.2242,.4989;5.6948,6.2514,.8356;3.7331,7.1038,.6592;6.1387,7.1563,1.26;-2.3002,-3.9824,-2.8921;-2.5054,-5.0091,-2.5523;-3.1512,-3.6589,-3.5211;-1.4072,-4.0008,-3.5373;-1.6467,-1.6369,-2.1356;-2.3722,-1.1619,-2.8205;-1.4822,-.9684,-1.2753;-.6918,-1.6954,-2.6826;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662795336253</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002256793981 0.000398680692 0.029038967821 0.005351545187</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056924443 -0.000970746 0.000187775 0.000321680 0.000371904 0.000393584 0.000480625 0.000519339 0.000638533 0.000709028 0.000881905 0.000909289 0.001087980 0.001163414 0.001319679 0.001356357 0.001404754 0.001547400 0.002175367 0.002337966 0.002412352 0.002567662 0.002788721 0.003219819 0.003499982 0.003787158 0.004265457 0.004479880 0.004674280 0.004776616 0.005201029 0.005229457 0.006053350 0.006171946 0.006727320 0.006829826 0.007105050 0.007339348 0.008156315 0.008466068 0.008864443 0.009345788 0.009711991 0.010271938 0.010954245 0.011263298 0.011459270 0.012268152 0.013206220 0.013557762 0.013888074 0.014573261 0.014916779 0.015461974 0.015746157 0.016544392 0.016987568 0.018198737 0.018686769 0.019326459 0.020299231 0.020373717 0.021056160 0.021782753 0.022217559 0.022701581 0.023358339 0.023785696 0.024489156 0.025838222 0.026393999 0.026603545 0.027038411 0.027314117 0.028110155 0.029001812 0.030809660 0.031413412 0.032683417 0.033869700 0.034541328 0.035796964 0.038983581 0.039362604 0.041909214 0.045365530 0.045584844 0.046471501 0.048553622 0.049545362 0.049758104 0.050530909 0.051532793 0.052101426 0.052283479 0.052385044 0.052683923 0.053350721 0.054760029 0.055797810 0.056320705 0.056608783 0.056651928 0.056975479 0.057633792 0.058452639 0.059191123 0.059649763 0.060859714 0.061968322 0.062628535 0.064188776 0.064518049 0.064949743 0.065814886 0.067196028 0.067850152 0.068878719 0.070489998 0.071816214 0.072383751 0.072519495 0.072908838 0.075324603 0.078501543 0.080694413 0.081512334 0.083204547 0.083631615 0.086600637 0.088581401 0.089332309 0.089787968 0.091282832 0.093231602 0.094550436 0.095450110 0.096154520 0.096809617 0.098156288 0.100055646 0.100555293 0.102497587 0.103561687 0.104040439 0.106225017 0.108529077 0.110569716 0.111915390 0.112203820 0.113502961 0.114369161 0.116750647 0.116908680 0.117947223 0.118477068 0.120264671 0.121805919 0.124658850 0.125527169 0.128409367 0.128849307 0.130674563 0.133423864 0.136052958 0.137666571 0.138557013 0.139605869 0.139913579 0.141712069 0.143532048 0.145658597 0.146643116 0.151711221 0.153369866 0.153922411 0.160114063 0.160919536 0.168453497 0.171307732 0.175858965 0.178775852 0.181354734 0.183878373 0.188829361 0.189490956 0.191604396 0.200938619 0.202149782 0.206242580 0.206885007 0.207221420 0.211945895 0.212421053 0.212989273 0.213539208 0.216536818 0.218274143 0.220589343 0.224193501 0.225408312 0.231822742 0.234530517 0.235377772 0.238336806 0.245947824 0.247661898 0.251369114 0.256492790 0.257173037 0.258095469 0.262320487 0.271541789 0.282751904 0.291800090 0.299712109 0.299918099 0.300949725 0.307009564 0.307759324 0.309732503 0.319253466 0.321310122 0.326274505 0.329901816 0.335400118 0.347636976 0.351968901 0.355582983 0.360298558 0.361433022 0.364075543 0.384327394 0.406731735 0.411942386 0.430171461 0.431969878 0.435232117 0.450449807 0.464451901 0.474028681 0.478749875 0.480229936 0.486572967 0.498874821 0.503219719 0.514065412 0.516402040 0.543696395 0.566897072 0.567640305 0.586226847 0.591844510 0.605648735 0.643734532 0.645251573 0.667760039 0.675553636 0.686820406 0.703069304 0.703792614 0.704339069 0.707259655 0.717096967 0.732776668 0.737269855 0.737999632 0.747346109 0.750746314 0.771604459 0.775960868 0.808596406 0.821664608 0.823836679 0.828421849 0.833904952 0.847016393 0.848629303 0.850486970 0.854453045 0.863216691 0.867459596 0.875128582 0.882386558 0.887532972 0.890922402 0.893131131 0.900846911 0.909863676 0.915618290 0.918534155 0.924398191 0.931708858 0.935092596 0.955323632 0.959585595 0.964970946 0.969807349 0.975875324 0.982357169 0.998545195 1.005267590 1.014813090 1.021105080 1.040025670 1.055027372 1.069326081 1.071422941 1.079141640 1.087282942 1.103426885 1.110256415 1.111601035 1.118555076 1.122501059 1.123511397 1.141797677 1.148456704 1.161697984 1.170002933 1.176579521 1.186957307 1.200707426 1.221088178 1.231326928 1.257882873 1.296366562 1.297468424 1.314641709 1.326356940 1.326722846 1.329909875 1.331316580 1.334659925 1.341886590 1.348505309 1.365196613 1.379860193 1.381248680 1.381573718 1.427135772 1.510284811 1.557895255 1.684682365 1.919168182</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">186</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9024229" y3="-0.95410086" z3="-0.71031513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55697298" y3="-1.95076571" z3="-1.63071653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04017681" y3="-0.9976052" z3="-1.48296523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73890467" y3="1.47496624" z3="-1.10782536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27487196" y3="0.31219821" z3="-0.51754233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61917091" y3="2.73988455" z3="-1.11021665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98034406" y3="2.73436818" z3="-0.8611436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3796413" y3="4.99395791" z3="-0.31220228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78733601" y3="3.85605076" z3="-0.80674951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76338564" y3="5.86964701" z3="-0.08625819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02820336" y3="1.61731123" z3="-1.61398686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14138726" y3="0.36548003" z3="0.24108436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6981503" y3="0.38314266" z3="-0.56627987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6245121" y3="0.71946373" z3="0.40164406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62573618" y3="-0.85565935" z3="-1.43105531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10810693" y3="-2.49358179" z3="-1.27049964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.22446904" y3="-5.51826874" z3="-6.17798189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.9196394" y3="-5.08331118" z3="-5.22186118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12542593" y3="-3.94087162" z3="-2.79424275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.88478027" y3="-3.70300162" z3="-5.0751721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58421513" y3="-5.9094732" z3="-4.14616455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20243208" y3="-5.33212269" z3="-2.94193336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49633309" y3="-3.09957976" z3="-3.86801377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.15251662" y3="-3.03607467" z3="-5.89840618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63453892" y3="-6.99731658" z3="-4.23802387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98162174" y3="-5.96554098" z3="-2.07862907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68513651" y3="-3.39255194" z3="-1.5627382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32759076" y3="-3.88216017" z3="-0.83963123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66122588" y3="-4.88480399" z3="-1.11904671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39974571" y3="-3.58356557" z3="0.60750148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49785749" y3="-3.11928099" z3="3.36591025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.7392961" y3="-4.61962587" z3="1.48696289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12809472" y3="-2.31119071" z3="1.12038679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17466272" y3="-2.08080268" z3="2.49098895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77933975" y3="-4.38983003" z3="2.86070873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.93386422" y3="-5.62130347" z3="1.09648989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10882513" y3="-1.47187911" z3="0.46581083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05171807" y3="-1.07657895" z3="2.85945609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00992752" y3="-5.21503724" z3="3.54052024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.5235931" y3="-2.94216633" z3="4.4451134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45480272" y3="-1.76392928" z3="-3.84135069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5327324" y3="-1.35326331" z3="-2.93594934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31177888" y3="3.72731957" z3="-0.92018346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10070077" y3="-3.02037384" z3="-1.74095989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91278952" y3="-3.16870395" z3="-0.61304714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11684307" y3="-2.27354559" z3="0.29674715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82474933" y3="-0.69289781" z3="0.51993131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.53666017" y3="-0.15126969" z3="-1.1204026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52919658" y3="0.41426244" z3="1.24439549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19335266" y3="-1.01881884" z3="1.75197401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41444972" y3="-4.37016944" z3="-0.36495229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15659703" y3="-4.5787275" z3="0.82681997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.77504041" y3="0.24028623" z3="-1.81250335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27008369" y3="0.65783024" z3="-0.94790791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.06516297" y3="-0.98105714" z3="-1.62570144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59837069" y3="0.51683591" z3="0.65310853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23913245" y3="0.05322847" z3="2.24523695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97313116" y3="1.41995159" z3="1.36164761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.65362222" y3="-0.06294655" z3="2.06077502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99309569" y3="-1.65182971" z3="1.32567223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.80219169" y3="-1.51342864" z3="2.66024731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0829786" y3="-3.98114575" z3="0.81841006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.55625886" y3="-4.3209746" z3="1.71321106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40469882" y3="-5.64849298" z3="0.83314327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28544414" y3="-2.19330152" z3="-0.1691583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14884604" y3="-3.31139967" z3="-1.00540057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51347307" y3="-4.46547294" z3="-0.56264371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01453343" y3="-4.49532029" z3="0.73388586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16314908" y3="-3.41842708" z3="1.60363515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79441937" y3="-2.26927232" z3="1.14464324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49988217" y3="-3.26114184" z3="-2.03950001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37652775" y3="-5.32105607" z3="-1.2246734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27042867" y3="-5.67255172" z3="1.18518809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75890517" y3="-3.48017277" z3="2.61506266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88817099" y3="-1.40917946" z3="1.80933324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48211653" y3="4.00960573" z3="0.19961571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85845625" y3="3.82566625" z3="0.16529588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43825493" y3="3.36306538" z3="-1.01067173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68264559" y3="3.10028741" z3="-2.15079252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3056613" y3="3.27526691" z3="-2.09536254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00482283" y3="4.33523181" z3="1.12687812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47940181" y3="4.01735396" z3="1.04145385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88237659" y3="3.1195493" z3="-1.04502798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17502666" y3="2.75115589" z3="-3.05925038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30179481" y3="3.04419201" z3="-2.97307811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16331436" y3="-5.85525748" z3="2.37696081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78427478" y3="-6.39399085" z3="0.33322933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40702528" y3="2.96381035" z3="-2.12563102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47388978" y3="3.06678265" z3="0.01724991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55124854" y3="0.15803379" z3="-2.12818758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87858833" y3="1.40472296" z3="-1.97326248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69689233" y3="0.08225376" z3="-2.96759174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1420465" y3="1.18455944" z3="-3.65411274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21074937" y3="-0.87874513" z3="-3.06749728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.01988119" y3="1.11359038" z3="-4.30220377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34767725" y3="2.52051728" z3="-2.7215596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44834949" y3="2.41316557" z3="-3.53721175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81641209" y3="3.47185052" z3="-2.65022175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.78730315" y3="3.28331857" z3="-4.1064655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58130601" y3="3.90197401" z3="-0.28477701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7731398" y3="5.05279845" z3="-0.04992287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94940454" y3="3.95253681" z3="0.1053277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49141068" y3="5.09487551" z3="0.64365153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57389588" y3="3.06605991" z3="-0.01982298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5450864" y3="5.10764575" z3="0.93637276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36600851" y3="6.22458268" z3="0.49636585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69730931" y3="6.25182689" z3="0.83001387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.735307" y3="7.1042555" z3="0.6576401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14212249" y3="7.15681615" z3="1.25306671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29850468" y3="-3.98796913" z3="-2.8903506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50278872" y3="-5.01435447" z3="-2.54861714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15028425" y3="-3.66662951" z3="-3.51960577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40532104" y3="-4.0063894" z3="-3.53476228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64308084" y3="-1.64346462" z3="-2.13687409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36894327" y3="-1.16927914" z3="-2.82173204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47803647" y3="-0.97372204" z3="-1.27744737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68998784" y3="-1.70214696" z3="-2.68483152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9024,-.9541,-.7103;6.557,-1.9508,-1.6307;6.0402,-.9976,-1.483;4.7389,1.475,-1.1078;4.2749,.3122,-.5175;2.6192,2.7399,-1.1102;3.9803,2.7344,-.8611;2.3796,4.994,-.3122;1.7873,3.8561,-.8067;1.7634,5.8696,-.0863;2.0282,1.6173,-1.614;3.1414,.3655,.2411;1.6982,.3831,-.5663;.6245,.7195,.4016;1.6257,-.8557,-1.4311;1.1081,-2.4936,-1.2705;2.2245,-5.5183,-6.178;1.9196,-5.0833,-5.2219;1.1254,-3.9409,-2.7942;1.8848,-3.703,-5.0752;1.5842,-5.9095,-4.1462;1.2024,-5.3321,-2.9419;1.4963,-3.0996,-3.868;2.1525,-3.0361,-5.8984;1.6345,-6.9973,-4.238;.9816,-5.9655,-2.0786;.6851,-3.3926,-1.5627;-.3276,-3.8822,-.8396;-.6612,-4.8848,-1.119;-.3997,-3.5836,.6075;-.4979,-3.1193,3.3659;-.7393,-4.6196,1.487;-.1281,-2.3112,1.1204;-.1747,-2.0808,2.491;-.7793,-4.3898,2.8607;-.9339,-5.6213,1.0965;.1088,-1.4719,.4658;.0517,-1.0766,2.8595;-1.0099,-5.215,3.5405;-.5236,-2.9422,4.4451;1.4548,-1.7639,-3.8414;1.5327,-1.3533,-2.9359;.3118,3.7273,-.9202;-2.1007,-3.0204,-1.741;-2.9128,-3.1687,-.613;-3.1168,-2.2735,.2967;-3.8247,-.6929,.5199;-4.5367,-.1513,-1.1204;-2.5292,.4143,1.2444;-5.1934,-1.0188,1.752;-3.4144,-4.3702,-.365;-4.1566,-4.5787,.8268;-3.775,.2403,-1.8125;-5.2701,.6578,-.9479;-5.0652,-.9811,-1.6257;-1.5984,.5168,.6531;-2.2391,.0532,2.2452;-2.9731,1.42,1.3616;-5.6536,-.0629,2.0608;-5.9931,-1.6518,1.3257;-4.8022,-1.5134,2.6602;-5.083,-3.9811,.8184;-3.5563,-4.321,1.7132;-4.4047,-5.6485,.8331;4.2854,-2.1933,-.1692;4.1488,-3.3114,-1.0054;3.5135,-4.4655,-.5626;3.0145,-4.4953,.7339;3.1631,-3.4184,1.6036;3.7944,-2.2693,1.1446;4.4999,-3.2611,-2.0395;3.3765,-5.3211,-1.2247;2.2704,-5.6726,1.1852;2.7589,-3.4802,2.6151;3.8882,-1.4092,1.8093;-.4821,4.0096,.1996;-1.8585,3.8257,.1653;-2.4383,3.3631,-1.0107;-1.6826,3.1003,-2.1508;-.3057,3.2753,-2.0954;-.0048,4.3352,1.1269;-2.4794,4.0174,1.0415;-3.8824,3.1195,-1.045;-2.175,2.7512,-3.0593;.3018,3.0442,-2.9731;2.1633,-5.8553,2.377;1.7843,-6.394,.3332;-4.407,2.9638,-2.1256;-4.4739,3.0668,.0172;6.5512,.158,-2.1282;5.8786,1.4047,-1.9733;7.6969,.0823,-2.9676;8.142,1.1846,-3.6541;8.2107,-.8787,-3.0675;9.0199,1.1136,-4.3022;6.3477,2.5205,-2.7216;7.4483,2.4132,-3.5372;5.8164,3.4719,-2.6502;7.7873,3.2833,-4.1065;4.5813,3.902,-.2848;3.7731,5.0528,-.0499;5.9494,3.9525,.1053;6.4914,5.0949,.6437;6.5739,3.0661,-.0198;7.5451,5.1076,.9364;4.366,6.2246,.4964;5.6973,6.2518,.83;3.7353,7.1043,.6576;6.1421,7.1568,1.2531;-2.2985,-3.988,-2.8904;-2.5028,-5.0144,-2.5486;-3.1503,-3.6666,-3.5196;-1.4053,-4.0064,-3.5348;-1.6431,-1.6435,-2.1369;-2.3689,-1.1693,-2.8217;-1.478,-.9737,-1.2774;-.69,-1.7021,-2.6848;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662782235051</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002377528526 0.000419877153 0.025620679100 0.005352442193</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056924130 -0.000978970 0.000188007 0.000319584 0.000371440 0.000396137 0.000479265 0.000517540 0.000636976 0.000710582 0.000886595 0.000910711 0.001087575 0.001163252 0.001321602 0.001356429 0.001406999 0.001549076 0.002175114 0.002337834 0.002418690 0.002583954 0.002791178 0.003219725 0.003500868 0.003787610 0.004261834 0.004487141 0.004680464 0.004783307 0.005202094 0.005230589 0.006064062 0.006170593 0.006734635 0.006834755 0.007107284 0.007340082 0.008156957 0.008465788 0.008876714 0.009346744 0.009712160 0.010278520 0.010958009 0.011264650 0.011460692 0.012269013 0.013206128 0.013557906 0.013888089 0.014572849 0.014919366 0.015461571 0.015747760 0.016548975 0.016997392 0.018276382 0.018694313 0.019347705 0.020308462 0.020373580 0.021056380 0.021784612 0.022229510 0.022704982 0.023359807 0.023788936 0.024489126 0.025839234 0.026422736 0.026606491 0.027039583 0.027314045 0.028111276 0.029003630 0.030810786 0.031413685 0.032697619 0.033903717 0.034567987 0.035801323 0.038995653 0.039365303 0.041918405 0.045365256 0.045597276 0.046593154 0.048554077 0.049560072 0.049770843 0.050556563 0.051533372 0.052102355 0.052283478 0.052385133 0.052683864 0.053350791 0.054762072 0.055842023 0.056320557 0.056623149 0.056660960 0.056975567 0.057646915 0.058452653 0.059193223 0.059651130 0.060864667 0.061976343 0.062642076 0.064188783 0.064518348 0.064950363 0.065816570 0.067214333 0.067850193 0.068879273 0.070496869 0.071829677 0.072427675 0.072525056 0.072912377 0.075335627 0.078508225 0.080694646 0.081516234 0.083206846 0.083743414 0.086606327 0.088581487 0.089339727 0.089789441 0.091282753 0.093234498 0.094553230 0.095450662 0.096157557 0.096809687 0.098156229 0.100062091 0.100569918 0.102505093 0.103572468 0.104040541 0.106228836 0.108547076 0.110579165 0.111928070 0.112223609 0.113535067 0.114375589 0.116751163 0.116940043 0.117974457 0.118476972 0.120284305 0.121805963 0.124689896 0.125527502 0.128412736 0.128849652 0.130674635 0.133430096 0.136058194 0.137667479 0.138585244 0.139606888 0.139941281 0.141752095 0.143537874 0.145661353 0.146682789 0.151738782 0.153374680 0.153971740 0.160116882 0.160942921 0.168453431 0.171308065 0.175858790 0.178775964 0.181358135 0.183880620 0.188830048 0.189546480 0.191605380 0.200955391 0.202150275 0.206242684 0.206887359 0.207221546 0.211974043 0.212463313 0.213182388 0.213633218 0.216537024 0.218275489 0.220590485 0.224194051 0.225408584 0.231823082 0.234530551 0.235378469 0.238336788 0.246036159 0.247785244 0.251409599 0.256492796 0.257173052 0.258122986 0.262320425 0.271544366 0.282760926 0.291800132 0.299711924 0.299918071 0.300950124 0.307009600 0.307762857 0.309745472 0.319267797 0.321310970 0.326274787 0.329902115 0.335417996 0.347639534 0.351969184 0.355582946 0.360340522 0.361443578 0.364075550 0.384329229 0.406733113 0.411973979 0.430171350 0.432017612 0.435233636 0.450491963 0.464463161 0.474085278 0.478750144 0.480251006 0.486587340 0.498876707 0.503302764 0.514069241 0.516410647 0.543696409 0.566897051 0.567640565 0.586295364 0.591846711 0.605649396 0.643735512 0.645251795 0.667795533 0.675555722 0.686859651 0.703253586 0.704136686 0.704350546 0.707544879 0.717097213 0.732932514 0.737346462 0.738001628 0.747353853 0.750747234 0.771604588 0.775961329 0.808596815 0.821664593 0.823840310 0.828482062 0.833908506 0.847018573 0.848716185 0.850609835 0.854453447 0.863216772 0.867460254 0.875134463 0.882531680 0.887542596 0.890926858 0.893152324 0.900846919 0.909879220 0.915654564 0.918686815 0.924400187 0.931710190 0.935098403 0.955411844 0.959999386 0.965005634 0.969835789 0.975930261 0.982357402 0.998546522 1.005511915 1.014826760 1.021105239 1.040026771 1.055027406 1.069345516 1.071569813 1.079143568 1.087283799 1.103431415 1.110256448 1.111601479 1.118557999 1.122501140 1.123511762 1.141797698 1.148500944 1.161699576 1.170003341 1.176589513 1.186974295 1.200707405 1.221089303 1.231348200 1.257895571 1.296367126 1.297516439 1.314643217 1.326357599 1.326722951 1.329909976 1.331322723 1.334659913 1.341887873 1.348527292 1.365212942 1.379884993 1.381255418 1.381575402 1.427214234 1.510308854 1.557895368 1.684683108 1.919387155</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">187</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90070457" y3="-0.95472994" z3="-0.71036119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55386475" y3="-1.95133338" z3="-1.63363723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03717959" y3="-0.9982117" z3="-1.4850908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73611507" y3="1.47430189" z3="-1.10869405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27314256" y3="0.31158189" z3="-0.51734615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61660487" y3="2.73983487" z3="-1.10747975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97815061" y3="2.73391139" z3="-0.86087042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37970008" y3="4.99450241" z3="-0.31083861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78584308" y3="3.85647696" z3="-0.80315688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76432718" y3="5.87070708" z3="-0.08427502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02428905" y3="1.61743553" z3="-1.60968594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.14087111" y3="0.36507716" z3="0.24301913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69619366" y3="0.38317782" z3="-0.56164125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62424815" y3="0.71913337" z3="0.40806317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62175304" y3="-0.8552034" z3="-1.42687437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1089978" y3="-2.49481955" z3="-1.26784989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.23061634" y3="-5.51638275" z3="-6.17625478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.92485147" y3="-5.08225268" z3="-5.22009006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12857041" y3="-3.94147958" z3="-2.79219685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.88995541" y3="-3.70217284" z3="-5.0723964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58854089" y3="-5.90921202" z3="-4.1452431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20558571" y3="-5.33264446" z3="-2.94100918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50103505" y3="-3.09962197" z3="-3.86501686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.15833269" y3="-3.03440783" z3="-5.89470468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.63918117" y3="-6.9969986" z3="-4.23781979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98405697" y3="-5.96666326" z3="-2.07830384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68728558" y3="-3.39403631" z3="-1.56062131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32629564" y3="-3.88353687" z3="-0.83886333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65865199" y3="-4.88666851" z3="-1.11796119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.40048173" y3="-3.58439973" z3="0.60812404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49762484" y3="-3.12090054" z3="3.36718282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.74016254" y3="-4.61982327" z3="1.4878564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12980326" y3="-2.31226117" z3="1.12098633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17484256" y3="-2.08290747" z3="2.49187882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.77999177" y3="-4.38992132" z3="2.86167784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92961762" y3="-5.62625247" z3="1.09996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10650798" y3="-1.47301484" z3="0.46614551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05076684" y3="-1.07817579" z3="2.85951964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.01143993" y3="-5.21458392" z3="3.54055004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.52203683" y3="-2.94504785" z3="4.44650761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4616366" y3="-1.76413872" z3="-3.83872215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53106029" y3="-1.35244533" z3="-2.93082538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30991388" y3="3.72888809" z3="-0.91396377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09862404" y3="-3.02466748" z3="-1.74221331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91076577" y3="-3.17053571" z3="-0.61394698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11470131" y3="-2.27127977" z3="0.29228735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82183983" y3="-0.69058685" z3="0.51143852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.52109422" y3="-0.146974" z3="-1.13103207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52845363" y3="0.41295238" z3="1.25000076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.20513355" y3="-1.01591422" z3="1.73157738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41277856" y3="-4.37105075" z3="-0.36214562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15476233" y3="-4.57604511" z3="0.8310967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.75333093" y3="0.2518055" z3="-1.81345743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.2593505" y3="0.65777098" z3="-0.96215844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.03954229" y3="-0.97667116" z3="-1.64382813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.5971153" y3="0.51286702" z3="0.66506646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.24985871" y3="0.04736995" z3="2.2553999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97286514" y3="1.41844655" z3="1.36531715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66458431" y3="-0.05715694" z3="2.03545985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00166271" y3="-1.64590138" z3="1.30045274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.82186022" y3="-1.51101826" z3="2.6401323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.08072984" y3="-3.97813558" z3="0.82089544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5540282" y3="-4.31597788" z3="1.71666556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40366477" y3="-5.64577159" z3="0.84093881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28488879" y3="-2.19425661" z3="-0.16833478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14837528" y3="-3.31172704" z3="-1.00442844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51357042" y3="-4.46583836" z3="-0.56149849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01404886" y3="-4.49579663" z3="0.73467114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16282036" y3="-3.41987524" z3="1.60434814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79451923" y3="-2.27129901" z3="1.14550683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49972753" y3="-3.26145" z3="-2.03825995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37738654" y3="-5.32135252" z3="-1.22325506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27011" y3="-5.67272108" z3="1.18567076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75801816" y3="-3.48142505" z3="2.61549357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88958667" y3="-1.41313033" z3="1.81092923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48181929" y3="4.01155527" z3="0.20680805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85808915" y3="3.82810469" z3="0.17599741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44071505" y3="3.36805814" z3="-0.9999988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68732627" y3="3.10547831" z3="-2.14154402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31002591" y3="3.27849946" z3="-2.08828047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00231795" y3="4.33554313" z3="1.13382161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47758182" y3="4.02034615" z3="1.05234903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8846598" y3="3.12590214" z3="-1.0308643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18194417" y3="2.75837887" z3="-3.04974054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29619468" y3="3.04649043" z3="-2.96518021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1619098" y3="-5.85497665" z3="2.37724837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78524333" y3="-6.39452043" z3="0.33348926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41274784" y3="2.97932335" z3="-2.11243163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47380385" y3="3.06733756" z3="0.03219553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5470795" y3="0.15723709" z3="-2.13164749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87450241" y3="1.40391695" z3="-1.97601636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.6916066" y3="0.08118203" z3="-2.97280135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.13599351" y3="1.18338683" z3="-3.65994392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20531983" y3="-0.87990861" z3="-3.07335762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.01312945" y3="1.11231147" z3="-4.30909557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34258187" y3="2.5195014" z3="-2.72529983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44232757" y3="2.41201191" z3="-3.54229758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81134042" y3="3.4708325" z3="-2.6536595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.78063884" y3="3.28212087" z3="-4.11197134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58063476" y3="3.90164235" z3="-0.28633183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77360787" y3="5.05300019" z3="-0.05123203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94933944" y3="3.95197388" z3="0.10145882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49308721" y3="5.09463344" z3="0.63731112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57304288" y3="3.06503094" z3="-0.02366049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54734386" y3="5.10720848" z3="0.92803679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36808911" y3="6.22507557" z3="0.49265707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70007189" y3="6.25213104" z3="0.82361509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73810199" y3="7.10515987" z3="0.65435552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14620705" y3="7.1573836" z3="1.24467386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29708456" y3="-3.99502042" z3="-2.88943656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50079662" y3="-5.02059447" z3="-2.54543509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.14928138" y3="-3.67517942" z3="-3.5184735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40457785" y3="-4.01432186" z3="-3.53500575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64190103" y3="-1.64762885" z3="-2.14153716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36732267" y3="-1.17446472" z3="-2.82777021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4767495" y3="-0.97656875" z3="-1.28318132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68722531" y3="-1.70834143" z3="-2.68832935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9007,-.9547,-.7104;6.5539,-1.9513,-1.6336;6.0372,-.9982,-1.4851;4.7361,1.4743,-1.1087;4.2731,.3116,-.5173;2.6166,2.7398,-1.1075;3.9782,2.7339,-.8609;2.3797,4.9945,-.3108;1.7858,3.8565,-.8032;1.7643,5.8707,-.0843;2.0243,1.6174,-1.6097;3.1409,.3651,.243;1.6962,.3832,-.5616;.6242,.7191,.4081;1.6218,-.8552,-1.4269;1.109,-2.4948,-1.2678;2.2306,-5.5164,-6.1763;1.9249,-5.0823,-5.2201;1.1286,-3.9415,-2.7922;1.89,-3.7022,-5.0724;1.5885,-5.9092,-4.1452;1.2056,-5.3326,-2.941;1.501,-3.0996,-3.865;2.1583,-3.0344,-5.8947;1.6392,-6.997,-4.2378;.9841,-5.9667,-2.0783;.6873,-3.394,-1.5606;-.3263,-3.8835,-.8389;-.6587,-4.8867,-1.118;-.4005,-3.5844,.6081;-.4976,-3.1209,3.3672;-.7402,-4.6198,1.4879;-.1298,-2.3123,1.121;-.1748,-2.0829,2.4919;-.78,-4.3899,2.8617;-.9296,-5.6263,1.1;.1065,-1.473,.4661;.0508,-1.0782,2.8595;-1.0114,-5.2146,3.5406;-.522,-2.945,4.4465;1.4616,-1.7641,-3.8387;1.5311,-1.3524,-2.9308;.3099,3.7289,-.914;-2.0986,-3.0247,-1.7422;-2.9108,-3.1705,-.6139;-3.1147,-2.2713,.2923;-3.8218,-.6906,.5114;-4.5211,-.147,-1.131;-2.5285,.413,1.25;-5.2051,-1.0159,1.7316;-3.4128,-4.3711,-.3621;-4.1548,-4.576,.8311;-3.7533,.2518,-1.8135;-5.2594,.6578,-.9622;-5.0395,-.9767,-1.6438;-1.5971,.5129,.6651;-2.2499,.0474,2.2554;-2.9729,1.4184,1.3653;-5.6646,-.0572,2.0355;-6.0017,-1.6459,1.3005;-4.8219,-1.511,2.6401;-5.0807,-3.9781,.8209;-3.554,-4.316,1.7167;-4.4037,-5.6458,.8409;4.2849,-2.1943,-.1683;4.1484,-3.3117,-1.0044;3.5136,-4.4658,-.5615;3.014,-4.4958,.7347;3.1628,-3.4199,1.6043;3.7945,-2.2713,1.1455;4.4997,-3.2614,-2.0383;3.3774,-5.3214,-1.2233;2.2701,-5.6727,1.1857;2.758,-3.4814,2.6155;3.8896,-1.4131,1.8109;-.4818,4.0116,.2068;-1.8581,3.8281,.176;-2.4407,3.3681,-1;-1.6873,3.1055,-2.1415;-.31,3.2785,-2.0883;-.0023,4.3355,1.1338;-2.4776,4.0203,1.0523;-3.8847,3.1259,-1.0309;-2.1819,2.7584,-3.0497;.2962,3.0465,-2.9652;2.1619,-5.855,2.3772;1.7852,-6.3945,.3335;-4.4127,2.9793,-2.1124;-4.4738,3.0673,.0322;6.5471,.1572,-2.1316;5.8745,1.4039,-1.976;7.6916,.0812,-2.9728;8.136,1.1834,-3.6599;8.2053,-.8799,-3.0734;9.0131,1.1123,-4.3091;6.3426,2.5195,-2.7253;7.4423,2.412,-3.5423;5.8113,3.4708,-2.6537;7.7806,3.2821,-4.112;4.5806,3.9016,-.2863;3.7736,5.053,-.0512;5.9493,3.952,.1015;6.4931,5.0946,.6373;6.573,3.065,-.0237;7.5473,5.1072,.928;4.3681,6.2251,.4927;5.7001,6.2521,.8236;3.7381,7.1052,.6544;6.1462,7.1574,1.2447;-2.2971,-3.995,-2.8894;-2.5008,-5.0206,-2.5454;-3.1493,-3.6752,-3.5185;-1.4046,-4.0143,-3.535;-1.6419,-1.6476,-2.1415;-2.3673,-1.1745,-2.8278;-1.4767,-.9766,-1.2832;-.6872,-1.7083,-2.6883;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662770224460</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002430911560 0.000408053789 0.030711109092 0.005355782213</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056926646 -0.000967010 0.000189715 0.000317405 0.000370323 0.000395165 0.000479695 0.000516771 0.000636060 0.000708819 0.000887371 0.000911632 0.001089373 0.001164514 0.001321731 0.001357465 0.001407434 0.001550622 0.002175829 0.002338414 0.002418076 0.002587994 0.002806277 0.003226640 0.003501093 0.003787736 0.004261528 0.004500166 0.004681447 0.004785064 0.005202863 0.005230218 0.006064680 0.006174876 0.006740633 0.006839544 0.007107605 0.007346241 0.008157568 0.008466803 0.008888692 0.009348657 0.009712092 0.010278572 0.010965425 0.011263850 0.011469687 0.012280640 0.013206430 0.013558578 0.013888100 0.014572510 0.014921057 0.015461335 0.015751205 0.016551349 0.017006288 0.018327788 0.018695036 0.019368758 0.020311664 0.020373839 0.021056320 0.021786638 0.022234543 0.022710031 0.023360963 0.023793796 0.024489220 0.025840432 0.026448323 0.026613598 0.027041672 0.027314088 0.028112797 0.029005730 0.030814114 0.031414523 0.032718803 0.033927148 0.034586879 0.035801279 0.039001657 0.039364694 0.041920103 0.045365387 0.045606895 0.046646296 0.048554527 0.049579384 0.049781792 0.050578513 0.051533552 0.052102785 0.052283664 0.052385149 0.052684199 0.053350788 0.054762252 0.055884535 0.056320389 0.056630421 0.056677551 0.056975510 0.057657756 0.058453429 0.059199768 0.059651868 0.060866347 0.061980791 0.062651330 0.064189196 0.064518366 0.064950472 0.065816383 0.067233858 0.067851047 0.068881386 0.070497044 0.071848252 0.072470386 0.072543208 0.072921883 0.075354083 0.078515639 0.080694627 0.081522073 0.083208043 0.083849240 0.086631858 0.088581946 0.089344604 0.089791262 0.091282758 0.093239290 0.094556769 0.095450976 0.096160543 0.096809980 0.098158283 0.100068330 0.100576028 0.102504279 0.103594882 0.104044037 0.106234137 0.108566551 0.110594193 0.111946505 0.112246167 0.113579133 0.114379837 0.116751407 0.116966576 0.118004735 0.118477016 0.120304925 0.121805696 0.124707963 0.125527580 0.128413866 0.128853683 0.130675054 0.133433311 0.136074078 0.137670234 0.138598104 0.139607067 0.139961705 0.141821046 0.143539474 0.145662402 0.146711573 0.151755441 0.153375163 0.153999219 0.160121983 0.160962453 0.168454030 0.171308037 0.175860929 0.178775885 0.181357878 0.183887875 0.188830223 0.189603458 0.191605312 0.200980897 0.202151528 0.206243471 0.206889654 0.207221548 0.211989188 0.212480219 0.213310190 0.213839972 0.216538856 0.218277497 0.220591301 0.224199176 0.225408651 0.231823952 0.234530696 0.235378868 0.238337453 0.246161978 0.247996886 0.251415759 0.256492803 0.257173036 0.258142092 0.262322089 0.271547626 0.282766759 0.291801259 0.299715551 0.299918139 0.300950121 0.307009582 0.307765386 0.309749395 0.319266776 0.321313953 0.326274858 0.329907553 0.335431927 0.347645930 0.351969694 0.355582967 0.360352215 0.361456202 0.364075619 0.384336624 0.406734450 0.412023713 0.430171654 0.432035391 0.435235707 0.450525241 0.464470787 0.474160772 0.478753544 0.480272281 0.486594938 0.498878194 0.503388149 0.514071724 0.516429158 0.543697714 0.566897763 0.567640691 0.586362292 0.591846223 0.605649324 0.643737297 0.645252239 0.667823399 0.675556051 0.686890993 0.703300746 0.704313910 0.704413646 0.707908061 0.717097773 0.733081267 0.737507822 0.738009829 0.747353007 0.750748200 0.771604585 0.775961668 0.808597762 0.821664924 0.823842941 0.828547307 0.833911363 0.847024619 0.848816039 0.850699115 0.854454005 0.863218772 0.867461332 0.875142914 0.882788198 0.887560561 0.890928276 0.893169604 0.900846949 0.909898564 0.915692042 0.918761970 0.924402443 0.931710523 0.935105202 0.955489377 0.960443362 0.965028752 0.969844259 0.975948323 0.982357779 0.998548360 1.005844998 1.014840443 1.021105871 1.040027175 1.055027753 1.069361485 1.071715595 1.079159299 1.087285500 1.103438247 1.110256947 1.111602103 1.118562209 1.122501160 1.123511758 1.141797791 1.148534231 1.161700065 1.170003747 1.176595620 1.187006102 1.200708636 1.221095161 1.231365253 1.257898322 1.296367111 1.297520349 1.314644072 1.326359399 1.326723267 1.329909977 1.331323208 1.334659915 1.341889045 1.348529301 1.365216985 1.379901048 1.381260612 1.381576645 1.427293004 1.510343801 1.557896948 1.684683125 1.919594473</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">188</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89778759" y3="-0.95497309" z3="-0.71125877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55056721" y3="-1.95160322" z3="-1.63474491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03382471" y3="-0.99854056" z3="-1.48640692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73317727" y3="1.47386224" z3="-1.10985035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27062571" y3="0.31141684" z3="-0.51766995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.614248" y3="2.7401836" z3="-1.10595439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97611204" y3="2.73370439" z3="-0.86129633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37915257" y3="4.99500555" z3="-0.30820707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78436649" y3="3.85721292" z3="-0.80006833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76426671" y3="5.87136262" z3="-0.08035423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02078629" y3="1.61795896" z3="-1.60730799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13941599" y3="0.36538874" z3="0.24420319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69359523" y3="0.38418604" z3="-0.55846267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62333842" y3="0.72119522" z3="0.41270142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61739146" y3="-0.85450578" z3="-1.42299842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1089169" y3="-2.49533444" z3="-1.26617634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.23769598" y3="-5.51473687" z3="-6.17401257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.93067731" y3="-5.08109894" z3="-5.21800203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13077931" y3="-3.94189265" z3="-2.79066837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.89543607" y3="-3.70103588" z3="-5.06953526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59275246" y3="-5.90870438" z3="-4.14417055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20810675" y3="-5.33296315" z3="-2.94009148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50427003" y3="-3.09920169" z3="-3.86244987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.16495166" y3="-3.03291366" z3="-5.89121003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64336543" y3="-6.99641763" z3="-4.23735965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98547529" y3="-5.96757817" z3="-2.07815994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68823813" y3="-3.39484482" z3="-1.5594256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32422263" y3="-3.88657245" z3="-0.83707295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65595747" y3="-4.88964936" z3="-1.11656724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39844915" y3="-3.58733894" z3="0.60964976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4989332" y3="-3.11957481" z3="3.3673386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73541042" y3="-4.62351044" z3="1.49002762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13032878" y3="-2.31364308" z3="1.12127028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17746704" y3="-2.08173567" z3="2.49164189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7765278" y3="-4.39190637" z3="2.86357547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92617535" y3="-5.62690503" z3="1.10101799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10503316" y3="-1.47498769" z3="0.46539365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04647957" y3="-1.0767222" z3="2.85890345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-1.00583418" y3="-5.21654412" z3="3.54390233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.525174" y3="-2.94135828" z3="4.44643243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46323973" y3="-1.76365715" z3="-3.83442593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53468805" y3="-1.35335885" z3="-2.92818263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3082636" y3="3.73008078" z3="-0.90849752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09811677" y3="-3.02862594" z3="-1.74239369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91022272" y3="-3.16969186" z3="-0.61337586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11369288" y3="-2.26785565" z3="0.29032852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82197352" y3="-0.68752624" z3="0.50771825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.50483532" y3="-0.13631436" z3="-1.14213705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5325884" y3="0.41027519" z3="1.25614221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21306687" y3="-1.01329984" z3="1.71366947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41309967" y3="-4.36908014" z3="-0.35821611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.15212701" y3="-4.57176356" z3="0.83682482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.73175631" y3="0.26837554" z3="-1.81381269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.2496207" y3="0.6634739" z3="-0.97744275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.0137108" y3="-0.96631487" z3="-1.66696448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59290539" y3="0.50920394" z3="0.67845085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26070061" y3="0.04454227" z3="2.26001017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97221228" y3="1.41844384" z3="1.36905961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67440599" y3="-0.05655945" z3="2.01683269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00793396" y3="-1.64104644" z3="1.26974163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.84154349" y3="-1.51328014" z3="2.62706528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07695536" y3="-3.9723847" z3="0.83007754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54774741" y3="-4.31300066" z3="1.7197804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.40324382" y3="-5.64049702" z3="0.84796911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28266483" y3="-2.19467277" z3="-0.16909329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14842564" y3="-3.31317737" z3="-1.0047631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51534593" y3="-4.46832942" z3="-0.561656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01568247" y3="-4.49887096" z3="0.73444012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16196028" y3="-3.42164959" z3="1.60372494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79155969" y3="-2.27159574" z3="1.1445823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49941253" y3="-3.26240913" z3="-2.03869593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38016508" y3="-5.32399103" z3="-1.2233864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27217984" y3="-5.67630075" z3="1.18505451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75694165" y3="-3.48367742" z3="2.6147573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88360647" y3="-1.4114131" z3="1.80918829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4812139" y3="4.01059606" z3="0.21502022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85788951" y3="3.82907956" z3="0.18530368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44270363" y3="3.37184493" z3="-0.99047049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69151586" y3="3.11062284" z3="-2.13394441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31392429" y3="3.28195435" z3="-2.08252786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="0.00000019" y3="4.33291084" z3="1.14159892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4753294" y3="4.01960496" z3="1.06423789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88779839" y3="3.13350441" z3="-1.02148873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18779655" y3="2.7657483" z3="-3.04202308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29024202" y3="3.05157512" z3="-2.96235078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16417171" y3="-5.85906804" z3="2.37651342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78690204" y3="-6.39757735" z3="0.33261633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41777509" y3="2.99292975" z3="-2.10138651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47465685" y3="3.06953419" z3="0.04269922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54307812" y3="0.15663727" z3="-2.13385055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87049635" y3="1.40319387" z3="-1.97834126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68668464" y3="0.08040722" z3="-2.97614857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1299771" y3="1.18223183" z3="-3.66472851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.20042856" y3="-0.88057393" z3="-3.07666047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.00627727" y3="1.11095524" z3="-4.31504382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.337464" y3="2.5184484" z3="-2.728841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.43624282" y3="2.41072926" z3="-3.54711689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80613047" y3="3.46967765" z3="-2.65707007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.77366431" y3="3.28052193" z3="-4.1178884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57993766" y3="3.90119161" z3="-0.28770967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7736036" y3="5.05299352" z3="-0.05100901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94951042" y3="3.95084931" z3="0.0975328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49464867" y3="5.09338721" z3="0.63222138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57278559" y3="3.06351001" z3="-0.02884922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54955628" y3="5.1054603" z3="0.92085763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36954545" y3="6.2249479" z3="0.49164641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70225488" y3="6.25142023" z3="0.82003365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74025812" y3="7.10546742" z3="0.65411464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14962483" y3="7.15663483" z3="1.23991743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29616957" y3="-4.00363828" z3="-2.88633088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50186078" y3="-5.02762488" z3="-2.53791746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1469936" y3="-3.68521555" z3="-3.51843722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40272301" y3="-4.02781728" z3="-3.53076445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64003548" y3="-1.65356045" z3="-2.14644805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36595956" y3="-1.18198555" z3="-2.83308505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.4733995" y3="-0.97981298" z3="-1.29034354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68710708" y3="-1.71576456" z3="-2.69452737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8978,-.955,-.7113;6.5506,-1.9516,-1.6347;6.0338,-.9985,-1.4864;4.7332,1.4739,-1.1099;4.2706,.3114,-.5177;2.6142,2.7402,-1.106;3.9761,2.7337,-.8613;2.3792,4.995,-.3082;1.7844,3.8572,-.8001;1.7643,5.8714,-.0804;2.0208,1.618,-1.6073;3.1394,.3654,.2442;1.6936,.3842,-.5585;.6233,.7212,.4127;1.6174,-.8545,-1.423;1.1089,-2.4953,-1.2662;2.2377,-5.5147,-6.174;1.9307,-5.0811,-5.218;1.1308,-3.9419,-2.7907;1.8954,-3.701,-5.0695;1.5928,-5.9087,-4.1442;1.2081,-5.333,-2.9401;1.5043,-3.0992,-3.8624;2.165,-3.0329,-5.8912;1.6434,-6.9964,-4.2374;.9855,-5.9676,-2.0782;.6882,-3.3948,-1.5594;-.3242,-3.8866,-.8371;-.656,-4.8896,-1.1166;-.3984,-3.5873,.6096;-.4989,-3.1196,3.3673;-.7354,-4.6235,1.49;-.1303,-2.3136,1.1213;-.1775,-2.0817,2.4916;-.7765,-4.3919,2.8636;-.9262,-5.6269,1.101;.105,-1.475,.4654;.0465,-1.0767,2.8589;-1.0058,-5.2165,3.5439;-.5252,-2.9414,4.4464;1.4632,-1.7637,-3.8344;1.5347,-1.3534,-2.9282;.3083,3.7301,-.9085;-2.0981,-3.0286,-1.7424;-2.9102,-3.1697,-.6134;-3.1137,-2.2679,.2903;-3.822,-.6875,.5077;-4.5048,-.1363,-1.1421;-2.5326,.4103,1.2561;-5.2131,-1.0133,1.7137;-3.4131,-4.3691,-.3582;-4.1521,-4.5718,.8368;-3.7318,.2684,-1.8138;-5.2496,.6635,-.9774;-5.0137,-.9663,-1.667;-1.5929,.5092,.6785;-2.2607,.0445,2.26;-2.9722,1.4184,1.3691;-5.6744,-.0566,2.0168;-6.0079,-1.641,1.2697;-4.8415,-1.5133,2.6271;-5.077,-3.9724,.8301;-3.5477,-4.313,1.7198;-4.4032,-5.6405,.848;4.2827,-2.1947,-.1691;4.1484,-3.3132,-1.0048;3.5153,-4.4683,-.5617;3.0157,-4.4989,.7344;3.162,-3.4216,1.6037;3.7916,-2.2716,1.1446;4.4994,-3.2624,-2.0387;3.3802,-5.324,-1.2234;2.2722,-5.6763,1.1851;2.7569,-3.4837,2.6148;3.8836,-1.4114,1.8092;-.4812,4.0106,.215;-1.8579,3.8291,.1853;-2.4427,3.3718,-.9905;-1.6915,3.1106,-2.1339;-.3139,3.282,-2.0825;0,4.3329,1.1416;-2.4753,4.0196,1.0642;-3.8878,3.1335,-1.0215;-2.1878,2.7657,-3.042;.2902,3.0516,-2.9624;2.1642,-5.8591,2.3765;1.7869,-6.3976,.3326;-4.4178,2.9929,-2.1014;-4.4747,3.0695,.0427;6.5431,.1566,-2.1339;5.8705,1.4032,-1.9783;7.6867,.0804,-2.9761;8.13,1.1822,-3.6647;8.2004,-.8806,-3.0767;9.0063,1.111,-4.315;6.3375,2.5184,-2.7288;7.4362,2.4107,-3.5471;5.8061,3.4697,-2.6571;7.7737,3.2805,-4.1179;4.5799,3.9012,-.2877;3.7736,5.053,-.051;5.9495,3.9508,.0975;6.4946,5.0934,.6322;6.5728,3.0635,-.0288;7.5496,5.1055,.9209;4.3695,6.2249,.4916;5.7023,6.2514,.82;3.7403,7.1055,.6541;6.1496,7.1566,1.2399;-2.2962,-4.0036,-2.8863;-2.5019,-5.0276,-2.5379;-3.147,-3.6852,-3.5184;-1.4027,-4.0278,-3.5308;-1.64,-1.6536,-2.1464;-2.366,-1.182,-2.8331;-1.4734,-.9798,-1.2903;-.6871,-1.7158,-2.6945;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662755984460</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002452358687 0.000434562186 0.026536070070 0.005350930091</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056932773 -0.001031257 0.000194660 0.000316030 0.000369334 0.000394251 0.000474874 0.000513544 0.000640050 0.000708385 0.000889518 0.000911901 0.001092764 0.001170380 0.001321686 0.001358387 0.001409223 0.001550140 0.002185013 0.002340367 0.002433301 0.002587927 0.002808704 0.003222798 0.003502274 0.003789833 0.004268458 0.004521719 0.004682579 0.004787040 0.005202841 0.005230338 0.006064667 0.006186736 0.006743820 0.006843855 0.007107582 0.007358944 0.008157392 0.008474696 0.008890687 0.009350247 0.009712704 0.010279124 0.010978404 0.011263737 0.011497413 0.012314429 0.013207779 0.013563569 0.013890819 0.014572248 0.014921349 0.015461643 0.015752141 0.016551864 0.017016124 0.018345954 0.018694952 0.019378428 0.020312155 0.020373819 0.021056694 0.021786649 0.022236467 0.022715296 0.023361064 0.023798091 0.024489370 0.025842620 0.026482386 0.026632030 0.027048433 0.027314369 0.028116926 0.029006905 0.030819693 0.031416966 0.032731393 0.033935327 0.034597842 0.035803338 0.039003097 0.039369922 0.041919963 0.045364954 0.045605621 0.046694021 0.048556284 0.049598139 0.049789208 0.050603940 0.051533612 0.052102811 0.052284023 0.052385245 0.052686818 0.053350991 0.054762263 0.055922752 0.056320439 0.056635132 0.056694326 0.056975466 0.057665426 0.058456213 0.059202950 0.059652854 0.060866838 0.061981462 0.062659083 0.064190082 0.064518358 0.064950524 0.065817654 0.067251111 0.067853270 0.068883432 0.070497202 0.071859030 0.072486097 0.072566393 0.072933383 0.075375006 0.078518994 0.080697331 0.081525407 0.083209198 0.083940644 0.086667470 0.088584416 0.089347058 0.089791606 0.091282637 0.093246240 0.094557663 0.095451686 0.096163770 0.096810318 0.098175197 0.100071029 0.100577730 0.102513973 0.103621606 0.104056693 0.106236668 0.108587077 0.110607339 0.111980592 0.112275561 0.113619713 0.114380250 0.116751245 0.116984539 0.118039313 0.118478203 0.120323344 0.121805449 0.124724696 0.125527855 0.128413774 0.128863485 0.130679136 0.133435083 0.136099450 0.137674880 0.138605919 0.139607288 0.139983788 0.141917164 0.143539781 0.145662420 0.146717031 0.151767420 0.153374351 0.154011809 0.160123131 0.160983817 0.168454519 0.171308444 0.175864879 0.178775889 0.181359865 0.183894818 0.188830889 0.189650708 0.191608936 0.201011310 0.202152703 0.206245367 0.206891030 0.207221759 0.212007020 0.212482850 0.213381004 0.214185190 0.216540864 0.218278220 0.220593054 0.224200069 0.225408721 0.231825596 0.234530745 0.235379489 0.238338112 0.246248198 0.248196046 0.251418616 0.256492883 0.257173093 0.258151242 0.262325752 0.271551751 0.282769302 0.291803712 0.299720620 0.299919168 0.300950332 0.307009752 0.307766582 0.309750053 0.319278817 0.321316189 0.326274848 0.329915560 0.335445777 0.347649632 0.351971681 0.355583232 0.360350783 0.361466320 0.364076178 0.384341245 0.406734469 0.412105960 0.430174899 0.432087543 0.435238350 0.450538103 0.464476086 0.474253885 0.478757389 0.480284994 0.486596354 0.498879098 0.503448824 0.514072157 0.516453254 0.543698112 0.566900622 0.567642863 0.586413013 0.591846521 0.605649295 0.643766970 0.645254844 0.667834691 0.675556015 0.686921940 0.703356241 0.704332847 0.704595174 0.708284461 0.717099067 0.733179206 0.737717507 0.738035040 0.747355187 0.750748495 0.771604648 0.775961704 0.808601344 0.821665100 0.823845869 0.828601257 0.833912047 0.847035801 0.848899751 0.850764900 0.854455049 0.863224901 0.867461952 0.875152681 0.883141596 0.887581072 0.890928365 0.893178851 0.900850634 0.909931085 0.915786167 0.918846454 0.924404866 0.931710535 0.935110883 0.955521292 0.960825804 0.965033173 0.969853262 0.975986932 0.982360685 0.998550872 1.006248015 1.014850865 1.021106369 1.040027189 1.055028276 1.069372008 1.071841016 1.079191741 1.087286690 1.103441782 1.110257581 1.111602445 1.118564162 1.122501285 1.123511750 1.141800845 1.148556386 1.161700422 1.170003791 1.176597267 1.187039806 1.200710964 1.221103773 1.231376577 1.257901130 1.296367166 1.297533806 1.314645832 1.326359216 1.326723370 1.329910768 1.331323615 1.334660855 1.341899791 1.348529720 1.365217031 1.379908120 1.381264102 1.381577268 1.427366436 1.510422334 1.557901664 1.684684934 1.919852932</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">189</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89449833" y3="-0.95623627" z3="-0.71428049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54660242" y3="-1.95236814" z3="-1.63994118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02977742" y3="-0.99943706" z3="-1.49081451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72974655" y3="1.47302167" z3="-1.11137204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26787855" y3="0.31028841" z3="-0.51921147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61095361" y3="2.74034259" z3="-1.10261812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97344019" y3="2.73310898" z3="-0.8606074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37855183" y3="4.99523389" z3="-0.30538907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78221818" y3="3.85771821" z3="-0.79575747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76463249" y3="5.87194089" z3="-0.07734571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01569237" y3="1.6187298" z3="-1.60327488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1380456" y3="0.36426826" z3="0.24474953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6905886" y3="0.38393063" z3="-0.55481604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62243673" y3="0.71948144" z3="0.419425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61195608" y3="-0.8536043" z3="-1.42094796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10936531" y3="-2.49655461" z3="-1.26439048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.24468151" y3="-5.51436528" z3="-6.1718114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.93611325" y3="-5.08126502" z3="-5.21604997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13322583" y3="-3.94306082" z3="-2.78893933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90092379" y3="-3.701416" z3="-5.06688706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59638767" y3="-5.90934877" z3="-4.14308016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21025892" y3="-5.33405084" z3="-2.9392949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.5085366" y3="-3.10006894" z3="-3.85993363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.17183187" y3="-3.03272842" z3="-5.88764984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.646989" y3="-6.99702994" z3="-4.23667915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9865902" y3="-5.96914801" z3="-2.07795935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69033622" y3="-3.39711252" z3="-1.55731037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32252951" y3="-3.88799544" z3="-0.83583537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65330267" y3="-4.8918874" z3="-1.11436646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39756424" y3="-3.58755564" z3="0.61088662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.49423253" y3="-3.12164179" z3="3.36935279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.73281376" y3="-4.62318152" z3="1.49195992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13123462" y3="-2.31388408" z3="1.12212978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17677169" y3="-2.08281003" z3="2.49253961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7722533" y3="-4.39210097" z3="2.86549978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.92005994" y3="-5.62968251" z3="1.10482933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10206939" y3="-1.4748958" z3="0.46600957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04481921" y3="-1.07655547" z3="2.8586493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.99924578" y3="-5.21722893" z3="3.54585315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.5190187" y3="-2.94447537" z3="4.44837477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46956999" y3="-1.76462982" z3="-3.83289239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53238805" y3="-1.35282871" z3="-2.92451143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30596236" y3="3.73156731" z3="-0.90289306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09639078" y3="-3.03257911" z3="-1.7413576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90772658" y3="-3.17128968" z3="-0.61174126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1109405" y3="-2.26670319" z3="0.28918766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81858587" y3="-0.68380632" z3="0.49909845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.48806807" y3="-0.12953225" z3="-1.15257141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53226413" y3="0.41142169" z3="1.26192535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22561438" y3="-1.00737274" z3="1.69331534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40962019" y3="-4.37022163" z3="-0.35227249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14904351" y3="-4.56785482" z3="0.84345487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.70891775" y3="0.28207541" z3="-1.81423385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.23758425" y3="0.66705153" z3="-0.99284086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.98861627" y3="-0.95797716" z3="-1.68466923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59200733" y3="0.50829932" z3="0.6905844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.27174692" y3="0.04174804" z3="2.27091459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97404445" y3="1.41827261" z3="1.37352311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68832441" y3="-0.04756081" z3="1.99029662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01532114" y3="-1.63346305" z3="1.24545688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.86196793" y3="-1.50545314" z3="2.60849969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07515186" y3="-3.96953296" z3="0.83117835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.54671171" y3="-4.30241885" z3="1.72676019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39736035" y3="-5.63798557" z3="0.85999763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28020121" y3="-2.19631939" z3="-0.17183737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14885773" y3="-3.31599281" z3="-1.00654361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.517467" y3="-4.47189896" z3="-0.5630288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01591506" y3="-4.50150768" z3="0.73243166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15910164" y3="-3.42313415" z3="1.60069379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7874424" y3="-2.27274763" z3="1.14131225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50150915" y3="-3.26634725" z3="-2.04007635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38560468" y3="-5.32938979" z3="-1.22378471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27538947" y3="-5.6808268" z3="1.18415925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75295919" y3="-3.48470071" z3="2.61135342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87787221" y3="-1.41270348" z3="1.80552872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48251209" y3="4.01160465" z3="0.22062443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85926302" y3="3.83112473" z3="0.19201642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44544362" y3="3.37668217" z3="-0.98416686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69524205" y3="3.11656733" z3="-2.12825585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31747934" y3="3.28626034" z3="-2.07743494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.000322" y3="4.33194676" z3="1.14732697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47619159" y3="4.02155973" z3="1.07045949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88980195" y3="3.13849436" z3="-1.01290515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19267958" y3="2.77400681" z3="-3.03658806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28591436" y3="3.05676883" z3="-2.95739245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16746565" y3="-5.86268246" z3="2.37614032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.79288487" y3="-6.40495564" z3="0.33230408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42163482" y3="3.00674002" z3="-2.09458636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47559779" y3="3.06829071" z3="0.05138105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53838343" y3="0.15595791" z3="-2.13825191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86589134" y3="1.40252638" z3="-1.9816139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68144508" y3="0.07996836" z3="-2.98121941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.12412475" y3="1.18201255" z3="-3.66965345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19532656" y3="-0.88093934" z3="-3.08210578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.00013743" y3="1.11101943" z3="-4.32017234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33198876" y3="2.51788029" z3="-2.73242645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.43013816" y3="2.41036121" z3="-3.55149883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.800513" y3="3.46901788" z3="-2.6602731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.7669199" y3="3.28021952" z3="-4.12244964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57876021" y3="3.90029933" z3="-0.28785856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77342444" y3="5.05242487" z3="-0.05027099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94865004" y3="3.94939168" z3="0.09582121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49486541" y3="5.09160511" z3="0.63009151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.57120541" y3="3.06188802" z3="-0.03075428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54982402" y3="5.10319892" z3="0.9178733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37056463" y3="6.22402897" z3="0.4916374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.7034481" y3="6.24990406" z3="0.81860848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74179108" y3="7.10471558" z3="0.65520379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1515187" y3="7.15480079" z3="1.23834093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29619551" y3="-4.00860644" z3="-2.88285002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50099794" y3="-5.03187417" z3="-2.5332235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.14835751" y3="-3.69174592" z3="-3.51352409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40371562" y3="-4.03229008" z3="-3.52801857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63811837" y3="-1.65882185" z3="-2.14764787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36355189" y3="-1.18829967" z3="-2.83545641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47165964" y3="-0.98390816" z3="-1.29256925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68411047" y3="-1.72250938" z3="-2.69481377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8945,-.9562,-.7143;6.5466,-1.9524,-1.6399;6.0298,-.9994,-1.4908;4.7297,1.473,-1.1114;4.2679,.3103,-.5192;2.611,2.7403,-1.1026;3.9734,2.7331,-.8606;2.3786,4.9952,-.3054;1.7822,3.8577,-.7958;1.7646,5.8719,-.0773;2.0157,1.6187,-1.6033;3.138,.3643,.2447;1.6906,.3839,-.5548;.6224,.7195,.4194;1.612,-.8536,-1.4209;1.1094,-2.4966,-1.2644;2.2447,-5.5144,-6.1718;1.9361,-5.0813,-5.216;1.1332,-3.9431,-2.7889;1.9009,-3.7014,-5.0669;1.5964,-5.9093,-4.1431;1.2103,-5.3341,-2.9393;1.5085,-3.1001,-3.8599;2.1718,-3.0327,-5.8876;1.647,-6.997,-4.2367;.9866,-5.9691,-2.078;.6903,-3.3971,-1.5573;-.3225,-3.888,-.8358;-.6533,-4.8919,-1.1144;-.3976,-3.5876,.6109;-.4942,-3.1216,3.3694;-.7328,-4.6232,1.492;-.1312,-2.3139,1.1221;-.1768,-2.0828,2.4925;-.7723,-4.3921,2.8655;-.9201,-5.6297,1.1048;.1021,-1.4749,.466;.0448,-1.0766,2.8586;-.9992,-5.2172,3.5459;-.519,-2.9445,4.4484;1.4696,-1.7646,-3.8329;1.5324,-1.3528,-2.9245;.306,3.7316,-.9029;-2.0964,-3.0326,-1.7414;-2.9077,-3.1713,-.6117;-3.1109,-2.2667,.2892;-3.8186,-.6838,.4991;-4.4881,-.1295,-1.1526;-2.5323,.4114,1.2619;-5.2256,-1.0074,1.6933;-3.4096,-4.3702,-.3523;-4.149,-4.5679,.8435;-3.7089,.2821,-1.8142;-5.2376,.6671,-.9928;-4.9886,-.958,-1.6847;-1.592,.5083,.6906;-2.2717,.0417,2.2709;-2.974,1.4183,1.3735;-5.6883,-.0476,1.9903;-6.0153,-1.6335,1.2455;-4.862,-1.5055,2.6085;-5.0752,-3.9695,.8312;-3.5467,-4.3024,1.7268;-4.3974,-5.638,.86;4.2802,-2.1963,-.1718;4.1489,-3.316,-1.0065;3.5175,-4.4719,-.563;3.0159,-4.5015,.7324;3.1591,-3.4231,1.6007;3.7874,-2.2727,1.1413;4.5015,-3.2663,-2.0401;3.3856,-5.3294,-1.2238;2.2754,-5.6808,1.1842;2.753,-3.4847,2.6114;3.8779,-1.4127,1.8055;-.4825,4.0116,.2206;-1.8593,3.8311,.192;-2.4454,3.3767,-.9842;-1.6952,3.1166,-2.1283;-.3175,3.2863,-2.0774;-.0003,4.3319,1.1473;-2.4762,4.0216,1.0705;-3.8898,3.1385,-1.0129;-2.1927,2.774,-3.0366;.2859,3.0568,-2.9574;2.1675,-5.8627,2.3761;1.7929,-6.405,.3323;-4.4216,3.0067,-2.0946;-4.4756,3.0683,.0514;6.5384,.156,-2.1383;5.8659,1.4025,-1.9816;7.6814,.08,-2.9812;8.1241,1.182,-3.6697;8.1953,-.8809,-3.0821;9.0001,1.111,-4.3202;6.332,2.5179,-2.7324;7.4301,2.4104,-3.5515;5.8005,3.469,-2.6603;7.7669,3.2802,-4.1224;4.5788,3.9003,-.2879;3.7734,5.0524,-.0503;5.9487,3.9494,.0958;6.4949,5.0916,.6301;6.5712,3.0619,-.0308;7.5498,5.1032,.9179;4.3706,6.224,.4916;5.7034,6.2499,.8186;3.7418,7.1047,.6552;6.1515,7.1548,1.2383;-2.2962,-4.0086,-2.8829;-2.501,-5.0319,-2.5332;-3.1484,-3.6917,-3.5135;-1.4037,-4.0323,-3.528;-1.6381,-1.6588,-2.1476;-2.3636,-1.1883,-2.8355;-1.4717,-.9839,-1.2926;-.6841,-1.7225,-2.6948;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662740421199</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002783563956 0.000458916865 0.029241320131 0.005336340070</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056947825 -0.001139535 0.000193780 0.000316150 0.000368880 0.000392710 0.000474041 0.000512393 0.000635130 0.000709567 0.000889397 0.000913219 0.001095423 0.001169451 0.001323390 0.001359908 0.001414888 0.001549963 0.002193909 0.002347463 0.002457909 0.002593181 0.002809244 0.003227046 0.003502480 0.003801803 0.004281196 0.004559217 0.004683277 0.004790154 0.005203572 0.005231717 0.006065196 0.006205236 0.006751541 0.006845423 0.007107618 0.007375397 0.008159812 0.008491831 0.008895070 0.009349966 0.009713571 0.010288179 0.010997584 0.011264640 0.011518371 0.012364492 0.013209035 0.013575348 0.013896604 0.014572012 0.014921386 0.015461129 0.015752949 0.016551796 0.017025286 0.018347696 0.018695090 0.019378578 0.020312863 0.020375527 0.021061525 0.021787559 0.022236649 0.022717545 0.023361015 0.023808050 0.024489488 0.025845389 0.026501422 0.026649957 0.027056466 0.027315348 0.028122834 0.029007306 0.030826900 0.031419607 0.032745142 0.033937250 0.034602210 0.035814487 0.039003172 0.039387874 0.041922279 0.045364689 0.045605398 0.046685891 0.048560202 0.049615781 0.049793132 0.050630012 0.051533599 0.052102791 0.052284271 0.052385497 0.052691887 0.053352019 0.054762262 0.055957182 0.056321603 0.056646511 0.056716558 0.056975591 0.057672459 0.058462606 0.059203758 0.059657587 0.060867576 0.061981436 0.062661315 0.064191301 0.064518560 0.064953422 0.065827605 0.067255297 0.067862171 0.068888545 0.070499528 0.071878454 0.072494639 0.072596472 0.072946590 0.075388966 0.078521094 0.080705918 0.081527047 0.083209131 0.083997398 0.086742475 0.088597813 0.089348066 0.089792079 0.091282767 0.093254734 0.094557494 0.095452984 0.096166496 0.096810942 0.098219591 0.100071447 0.100577809 0.102540268 0.103638598 0.104088680 0.106238553 0.108604138 0.110616421 0.112026252 0.112312523 0.113649651 0.114380696 0.116751513 0.116992157 0.118070488 0.118480673 0.120332701 0.121805234 0.124727838 0.125527808 0.128416793 0.128879464 0.130692522 0.133434994 0.136132511 0.137682201 0.138608045 0.139607878 0.140005160 0.142069758 0.143556023 0.145662799 0.146717224 0.151769720 0.153379273 0.154016725 0.160122963 0.160996261 0.168454496 0.171308981 0.175866811 0.178775853 0.181366893 0.183898807 0.188831252 0.189693279 0.191623018 0.201043111 0.202153872 0.206249506 0.206891829 0.207222369 0.212020239 0.212482805 0.213419902 0.214567176 0.216543705 0.218279888 0.220594513 0.224202071 0.225409097 0.231828009 0.234530808 0.235379726 0.238338892 0.246333204 0.248487136 0.251448611 0.256493320 0.257173372 0.258155137 0.262336532 0.271556505 0.282769222 0.291808421 0.299731625 0.299922452 0.300951113 0.307010896 0.307767717 0.309750468 0.319333357 0.321317754 0.326276155 0.329935387 0.335456497 0.347651764 0.351973372 0.355583846 0.360355810 0.361475836 0.364076743 0.384341563 0.406735427 0.412208994 0.430182454 0.432104817 0.435237936 0.450542634 0.464476847 0.474373065 0.478759545 0.480298066 0.486596311 0.498879647 0.503529129 0.514071878 0.516509036 0.543700308 0.566903639 0.567647962 0.586448146 0.591845880 0.605650227 0.643823807 0.645258418 0.667838273 0.675556927 0.686970120 0.703401086 0.704334174 0.704707909 0.708587549 0.717100124 0.733253335 0.737909266 0.738201514 0.747360148 0.750748544 0.771605093 0.775961758 0.808601495 0.821665090 0.823848797 0.828674911 0.833912033 0.847043030 0.849019597 0.850823140 0.854460427 0.863237780 0.867462548 0.875169728 0.883663735 0.887616001 0.890928470 0.893182608 0.900859255 0.909965979 0.915878300 0.918863692 0.924406265 0.931710716 0.935120838 0.955553038 0.961294278 0.965034465 0.969854698 0.976005867 0.982362066 0.998554544 1.006764175 1.014856102 1.021106816 1.040027482 1.055029633 1.069381112 1.071925865 1.079226328 1.087287608 1.103448919 1.110258925 1.111602444 1.118570225 1.122501445 1.123511789 1.141803140 1.148573591 1.161700414 1.170004298 1.176597451 1.187085768 1.200712642 1.221114763 1.231383483 1.257941342 1.296367192 1.297572154 1.314652320 1.326359059 1.326723964 1.329910813 1.331323750 1.334662411 1.341916022 1.348540053 1.365221796 1.379909179 1.381264422 1.381581387 1.427450150 1.510492501 1.557918754 1.684693015 1.920052234</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">190</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89126675" y3="-0.957624" z3="-0.71647906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54195443" y3="-1.95287838" z3="-1.64589049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02538392" y3="-1.00008017" z3="-1.49492132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72621343" y3="1.47200003" z3="-1.11148826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26492772" y3="0.30883155" z3="-0.5196894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60813076" y3="2.73997973" z3="-1.10089331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9704086" y3="2.73195972" z3="-0.85914911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37733422" y3="4.99467796" z3="-0.30177169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78030813" y3="3.85786824" z3="-0.79308712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76396472" y3="5.87170839" z3="-0.07231863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01228555" y3="1.61869987" z3="-1.60138555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13594241" y3="0.36279717" z3="0.2454539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68788376" y3="0.3839298" z3="-0.55287461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.62082976" y3="0.72042546" z3="0.42176511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60823631" y3="-0.85364444" z3="-1.41848851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1104482" y3="-2.49754911" z3="-1.26275707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.25123495" y3="-5.51639933" z3="-6.16786746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.94145071" y3="-5.08312639" z3="-5.21259445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13523094" y3="-3.94465191" z3="-2.78688088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90611903" y3="-3.70314969" z3="-5.06364548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59997089" y3="-5.91110389" z3="-4.14011704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21219336" y3="-5.33572448" z3="-2.93689337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51172933" y3="-3.10165239" z3="-3.85741412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.1782279" y3="-3.03465968" z3="-5.88417838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.65047558" y3="-6.99882107" z3="-4.23358989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98741979" y3="-5.97076413" z3="-2.07584993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69151008" y3="-3.39776154" z3="-1.55593264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32009883" y3="-3.89010095" z3="-0.83314451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65109655" y3="-4.89355237" z3="-1.11183261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39466913" y3="-3.58950074" z3="0.61320056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4904909" y3="-3.11979931" z3="3.37070322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.72471724" y3="-4.6264463" z3="1.49531297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1316385" y3="-2.31405186" z3="1.12299908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17612203" y3="-2.08134666" z3="2.49327649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.76343136" y3="-4.39369844" z3="2.86879302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.91012075" y3="-5.63248764" z3="1.10852784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09857681" y3="-1.47516281" z3="0.46560727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04378486" y3="-1.0748047" z3="2.85871597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.98746596" y3="-5.21867054" z3="3.55004873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.51423139" y3="-2.94126998" z3="4.44977451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47155272" y3="-1.7661717" z3="-3.82947971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5359982" y3="-1.35520442" z3="-2.9230656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30376632" y3="3.73334634" z3="-0.89976557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09599599" y3="-3.03469212" z3="-1.7407703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90664517" y3="-3.16797734" z3="-0.60992124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10875974" y3="-2.25868893" z3="0.28694044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81931932" y3="-0.67868109" z3="0.49553604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.47400693" y3="-0.12167009" z3="-1.16348511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53772672" y3="0.41225309" z3="1.26575476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23157975" y3="-1.00210618" z3="1.67635918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40962133" y3="-4.36532204" z3="-0.34549965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14509096" y3="-4.56009497" z3="0.85322638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.69074639" y3="0.29616353" z3="-1.81491191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.23055689" y3="0.66811327" z3="-1.00570714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.9620515" y3="-0.95306479" z3="-1.70591871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59117877" y3="0.5085215" z3="0.69968296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.28140216" y3="0.04253161" z3="2.27192966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97458368" y3="1.42213491" z3="1.37529852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69447589" y3="-0.04394243" z3="1.97208972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02080215" y3="-1.62587104" z3="1.21621556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.87874147" y3="-1.50505206" z3="2.59484902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06978226" y3="-3.96087704" z3="0.84572837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53795824" y3="-4.29594257" z3="1.73245597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.39637984" y3="-5.62842703" z3="0.87205216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27865355" y3="-2.19867262" z3="-0.17410532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14990752" y3="-3.31855396" z3="-1.00860998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52049253" y3="-4.47547836" z3="-0.56521461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01831005" y3="-4.50632794" z3="0.72987434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15870316" y3="-3.42775827" z3="1.59793979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78520483" y3="-2.27621756" z3="1.13868082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50271067" y3="-3.26810802" z3="-2.04190562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3895651" y3="-5.33202571" z3="-1.22617565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2782906" y3="-5.68562526" z3="1.18028483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75117553" y3="-3.48947112" z3="2.60803019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87300917" y3="-1.41554228" z3="1.80257664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48353989" y3="4.01115423" z3="0.22591324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86062292" y3="3.83243974" z3="0.19752374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44814703" y3="3.38192613" z3="-0.97980099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69905974" y3="3.12345101" z3="-2.1252764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.3208248" y3="3.29078244" z3="-2.0745275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0002171" y3="4.32873364" z3="1.15330829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.47647609" y3="4.02078023" z3="1.07809414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89416549" y3="3.14804175" z3="-1.01048417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19749033" y3="2.78391207" z3="-3.03439396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28212198" y3="3.0618127" z3="-2.95492195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17039315" y3="-5.86885915" z3="2.37155053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.79515869" y3="-6.40776208" z3="0.32752392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42699525" y3="3.02077291" z3="-2.09049586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47857392" y3="3.07352362" z3="0.05426819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53314853" y3="0.15575633" z3="-2.14228589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86118503" y3="1.40230432" z3="-1.98323503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67475279" y3="0.08025637" z3="-2.98766423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11664626" y3="1.1829355" z3="-3.67568053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18810916" y3="-0.88079351" z3="-3.09087823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.99147276" y3="1.11229596" z3="-4.3282491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32651941" y3="2.51848098" z3="-2.73331234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.42332678" y3="2.41151996" z3="-3.55451559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79550179" y3="3.46981111" z3="-2.65882845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75954023" y3="3.28202311" z3="-4.12483639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57653392" y3="3.8983206" z3="-0.28569378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77210745" y3="5.05085839" z3="-0.04685062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94674089" y3="3.94617867" z3="0.09723636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4942481" y3="5.08771954" z3="0.63162795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56869655" y3="3.05819256" z3="-0.0306698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54970439" y3="5.09836206" z3="0.91840153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.37039245" y3="6.22179469" z3="0.49534689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70372314" y3="6.24654691" z3="0.82129324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.742519" y3="7.10291019" z3="0.65921914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15299238" y3="7.15098194" z3="1.24080245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29637402" y3="-4.01658461" z3="-2.8785579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50336164" y3="-5.03817704" z3="-2.52331492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.14722643" y3="-3.70066051" z3="-3.51169037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40357551" y3="-4.04572863" z3="-3.5237858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63677782" y3="-1.66235828" z3="-2.15341023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36263081" y3="-1.19363615" z3="-2.84200288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46814581" y3="-0.98410486" z3="-1.30119615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68396198" y3="-1.72914061" z3="-2.70160284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8913,-.9576,-.7165;6.542,-1.9529,-1.6459;6.0254,-1.0001,-1.4949;4.7262,1.472,-1.1115;4.2649,.3088,-.5197;2.6081,2.74,-1.1009;3.9704,2.732,-.8591;2.3773,4.9947,-.3018;1.7803,3.8579,-.7931;1.764,5.8717,-.0723;2.0123,1.6187,-1.6014;3.1359,.3628,.2455;1.6879,.3839,-.5529;.6208,.7204,.4218;1.6082,-.8536,-1.4185;1.1104,-2.4975,-1.2628;2.2512,-5.5164,-6.1679;1.9415,-5.0831,-5.2126;1.1352,-3.9447,-2.7869;1.9061,-3.7031,-5.0636;1.6,-5.9111,-4.1401;1.2122,-5.3357,-2.9369;1.5117,-3.1017,-3.8574;2.1782,-3.0347,-5.8842;1.6505,-6.9988,-4.2336;.9874,-5.9708,-2.0758;.6915,-3.3978,-1.5559;-.3201,-3.8901,-.8331;-.6511,-4.8936,-1.1118;-.3947,-3.5895,.6132;-.4905,-3.1198,3.3707;-.7247,-4.6264,1.4953;-.1316,-2.3141,1.123;-.1761,-2.0813,2.4933;-.7634,-4.3937,2.8688;-.9101,-5.6325,1.1085;.0986,-1.4752,.4656;.0438,-1.0748,2.8587;-.9875,-5.2187,3.55;-.5142,-2.9413,4.4498;1.4716,-1.7662,-3.8295;1.536,-1.3552,-2.9231;.3038,3.7333,-.8998;-2.096,-3.0347,-1.7408;-2.9066,-3.168,-.6099;-3.1088,-2.2587,.2869;-3.8193,-.6787,.4955;-4.474,-.1217,-1.1635;-2.5377,.4123,1.2658;-5.2316,-1.0021,1.6764;-3.4096,-4.3653,-.3455;-4.1451,-4.5601,.8532;-3.6907,.2962,-1.8149;-5.2306,.6681,-1.0057;-4.9621,-.9531,-1.7059;-1.5912,.5085,.6997;-2.2814,.0425,2.2719;-2.9746,1.4221,1.3753;-5.6945,-.0439,1.9721;-6.0208,-1.6259,1.2162;-4.8787,-1.5051,2.5948;-5.0698,-3.9609,.8457;-3.538,-4.2959,1.7325;-4.3964,-5.6284,.8721;4.2787,-2.1987,-.1741;4.1499,-3.3186,-1.0086;3.5205,-4.4755,-.5652;3.0183,-4.5063,.7299;3.1587,-3.4278,1.5979;3.7852,-2.2762,1.1387;4.5027,-3.2681,-2.0419;3.3896,-5.332,-1.2262;2.2783,-5.6856,1.1803;2.7512,-3.4895,2.608;3.873,-1.4155,1.8026;-.4835,4.0112,.2259;-1.8606,3.8324,.1975;-2.4481,3.3819,-.9798;-1.6991,3.1235,-2.1253;-.3208,3.2908,-2.0745;-.0002,4.3287,1.1533;-2.4765,4.0208,1.0781;-3.8942,3.148,-1.0105;-2.1975,2.7839,-3.0344;.2821,3.0618,-2.9549;2.1704,-5.8689,2.3716;1.7952,-6.4078,.3275;-4.427,3.0208,-2.0905;-4.4786,3.0735,.0543;6.5331,.1558,-2.1423;5.8612,1.4023,-1.9832;7.6748,.0803,-2.9877;8.1166,1.1829,-3.6757;8.1881,-.8808,-3.0909;8.9915,1.1123,-4.3282;6.3265,2.5185,-2.7333;7.4233,2.4115,-3.5545;5.7955,3.4698,-2.6588;7.7595,3.282,-4.1248;4.5765,3.8983,-.2857;3.7721,5.0509,-.0469;5.9467,3.9462,.0972;6.4942,5.0877,.6316;6.5687,3.0582,-.0307;7.5497,5.0984,.9184;4.3704,6.2218,.4953;5.7037,6.2465,.8213;3.7425,7.1029,.6592;6.153,7.151,1.2408;-2.2964,-4.0166,-2.8786;-2.5034,-5.0382,-2.5233;-3.1472,-3.7007,-3.5117;-1.4036,-4.0457,-3.5238;-1.6368,-1.6624,-2.1534;-2.3626,-1.1936,-2.842;-1.4681,-.9841,-1.3012;-.684,-1.7291,-2.7016;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662726647392</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002889258211 0.000456724842 0.021440655111 0.005337982005</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056973149 -0.001150344 0.000186962 0.000315205 0.000368341 0.000391326 0.000468459 0.000512783 0.000633503 0.000709077 0.000889533 0.000913196 0.001094874 0.001172039 0.001324231 0.001359285 0.001423608 0.001550691 0.002196962 0.002348861 0.002462334 0.002598201 0.002813008 0.003253594 0.003502914 0.003816195 0.004293492 0.004579825 0.004683347 0.004795378 0.005204197 0.005236027 0.006067774 0.006216803 0.006758157 0.006851905 0.007108409 0.007383728 0.008163450 0.008507834 0.008892964 0.009351053 0.009714290 0.010307763 0.011017427 0.011267683 0.011537775 0.012407352 0.013209515 0.013589473 0.013906153 0.014572470 0.014921479 0.015461023 0.015753048 0.016551986 0.017032060 0.018349454 0.018696579 0.019379808 0.020314410 0.020375913 0.021071410 0.021787057 0.022237011 0.022718360 0.023361187 0.023818058 0.024490318 0.025848946 0.026517567 0.026677958 0.027068681 0.027315643 0.028130377 0.029008287 0.030833147 0.031419720 0.032750826 0.033936900 0.034603714 0.035834753 0.039003183 0.039412784 0.041926931 0.045364439 0.045606135 0.046684873 0.048564686 0.049624693 0.049794134 0.050659606 0.051533593 0.052102777 0.052284296 0.052385880 0.052697252 0.053354616 0.054762853 0.055976779 0.056326972 0.056662063 0.056756553 0.056976359 0.057678972 0.058472584 0.059203754 0.059663093 0.060874233 0.061983448 0.062662326 0.064191475 0.064518852 0.064959780 0.065853467 0.067254918 0.067870627 0.068894786 0.070502165 0.071909974 0.072498294 0.072613003 0.072956081 0.075396748 0.078520725 0.080720811 0.081527425 0.083209420 0.084021293 0.086814557 0.088635617 0.089348078 0.089792347 0.091283840 0.093263229 0.094558028 0.095455525 0.096168836 0.096811318 0.098284348 0.100073868 0.100583409 0.102566490 0.103648526 0.104108073 0.106239685 0.108615649 0.110620498 0.112074979 0.112366836 0.113658150 0.114380735 0.116760360 0.116993978 0.118100373 0.118484286 0.120336648 0.121806170 0.124730332 0.125528372 0.128422768 0.128890322 0.130701072 0.133435866 0.136161385 0.137685888 0.138611399 0.139608070 0.140028333 0.142283472 0.143620383 0.145666011 0.146721480 0.151771353 0.153389737 0.154019111 0.160122846 0.161013191 0.168454612 0.171309154 0.175866904 0.178775789 0.181371455 0.183898435 0.188831562 0.189719318 0.191649362 0.201077258 0.202155607 0.206253583 0.206892680 0.207222902 0.212038919 0.212483139 0.213449999 0.215091906 0.216548419 0.218281173 0.220601870 0.224202299 0.225410617 0.231831029 0.234530810 0.235380212 0.238338810 0.246370271 0.248730752 0.251513275 0.256493952 0.257173655 0.258155030 0.262352483 0.271560451 0.282773218 0.291818115 0.299746389 0.299929220 0.300951438 0.307013087 0.307768617 0.309753295 0.319434116 0.321319229 0.326279957 0.329963203 0.335466877 0.347651568 0.351977713 0.355585519 0.360362107 0.361481052 0.364077407 0.384341569 0.406737020 0.412333434 0.430195091 0.432186611 0.435239497 0.450542474 0.464477590 0.474491265 0.478761225 0.480304238 0.486597632 0.498880316 0.503596567 0.514074395 0.516566961 0.543702093 0.566905398 0.567651230 0.586463375 0.591845474 0.605650726 0.643901773 0.645265347 0.667838342 0.675557491 0.687018840 0.703454110 0.704334282 0.704846983 0.708794672 0.717100722 0.733274607 0.737948559 0.738495508 0.747359378 0.750748862 0.771605436 0.775962235 0.808601713 0.821665089 0.823853699 0.828733450 0.833913478 0.847046877 0.849113484 0.850883671 0.854462422 0.863249615 0.867462714 0.875181754 0.884204245 0.887652501 0.890935055 0.893182556 0.900879760 0.910018110 0.916135544 0.918872413 0.924408201 0.931711159 0.935130355 0.955571485 0.961700771 0.965034511 0.969854633 0.976007472 0.982362841 0.998559211 1.007363865 1.014858277 1.021107418 1.040027643 1.055030661 1.069385131 1.071974868 1.079254757 1.087288734 1.103457238 1.110260450 1.111602610 1.118575912 1.122501448 1.123511884 1.141808466 1.148584840 1.161700717 1.170009267 1.176600610 1.187122013 1.200714264 1.221118916 1.231383410 1.257982646 1.296369504 1.297644016 1.314654064 1.326359095 1.326723815 1.329911323 1.331324000 1.334667527 1.341940926 1.348545623 1.365225092 1.379918330 1.381264849 1.381585512 1.427486676 1.510671316 1.557933122 1.684696685 1.920319232</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">191</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88805406" y3="-0.95842672" z3="-0.72121666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53838446" y3="-1.95231277" z3="-1.65228197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02162902" y3="-0.99984766" z3="-1.50034589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7230678" y3="1.47158959" z3="-1.1129682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26201243" y3="0.30781304" z3="-0.52234374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60524549" y3="2.74015091" z3="-1.09886881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96785909" y3="2.73135714" z3="-0.85811324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37494075" y3="4.99339048" z3="-0.29549343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77757548" y3="3.85767201" z3="-0.78892246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76177292" y3="5.87012532" z3="-0.06484311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00892514" y3="1.61955613" z3="-1.60054495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13379704" y3="0.36116404" z3="0.24397664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68453996" y3="0.38444293" z3="-0.55241835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61934529" y3="0.72154926" z3="0.42444835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60178253" y3="-0.85243119" z3="-1.41902391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10938262" y3="-2.49834345" z3="-1.26305729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.25459788" y3="-5.52151106" z3="-6.16484672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.9439029" y3="-5.08761431" z3="-5.21015868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13594867" y3="-3.9473279" z3="-2.78564631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90995946" y3="-3.70772432" z3="-5.06169519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.60005991" y3="-5.9147964" z3="-4.13775985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21145943" y3="-5.33847205" z3="-2.9353424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51498076" y3="-3.10527645" z3="-3.8560897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.18391352" y3="-3.03969425" z3="-5.88200406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64953709" y3="-7.00257376" z3="-4.23060837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98536076" y3="-5.97301748" z3="-2.07431066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6922606" y3="-3.40027156" z3="-1.55481564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.31955561" y3="-3.89155994" z3="-0.83202192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.64998004" y3="-4.89584269" z3="-1.1094045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39299733" y3="-3.59002915" z3="0.61450108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4833202" y3="-3.12058942" z3="3.3723421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71931266" y3="-4.62658711" z3="1.49774714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13211776" y3="-2.31412136" z3="1.12325959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17498103" y3="-2.08085516" z3="2.49333891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.75511079" y3="-4.39390863" z3="2.87121464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.9034937" y3="-5.63329525" z3="1.11179529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09483156" y3="-1.47522037" z3="0.46492968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04229035" y3="-1.07309864" z3="2.85757886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.97438324" y3="-5.21964178" z3="3.55365205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.50593177" y3="-2.94156017" z3="4.45118667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47811763" y3="-1.76984888" z3="-3.83014922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5341062" y3="-1.35676666" z3="-2.92199231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30126094" y3="3.73373546" z3="-0.89681769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09493588" y3="-3.03825889" z3="-1.73903723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90408479" y3="-3.16741861" z3="-0.60654918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10379826" y3="-2.255683" z3="0.28788524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81443" y3="-0.67304014" z3="0.48840238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.45911111" y3="-0.11279773" z3="-1.17144863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53476301" y3="0.41645801" z3="1.26932369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.24092469" y3="-0.99439862" z3="1.66007969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40697016" y3="-4.36361457" z3="-0.33644057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13942073" y3="-4.55212603" z3="0.86539996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.67149611" y3="0.31059452" z3="-1.81509334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21861773" y3="0.67612431" z3="-1.02053159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.94312971" y3="-0.94074524" z3="-1.71887764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58805032" y3="0.51131817" z3="0.70737057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.28657222" y3="0.04285596" z3="2.27989041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97430147" y3="1.42429188" z3="1.37886935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.70449831" y3="-0.03327022" z3="1.95064907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02582323" y3="-1.61652836" z3="1.19895045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89483189" y3="-1.49523095" z3="2.58138721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06492839" y3="-3.95322913" z3="0.85499518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53092934" y3="-4.28099039" z3="1.74285496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38881274" y3="-5.62190286" z3="0.89157947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27625827" y3="-2.1999553" z3="-0.17926444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15031406" y3="-3.32085537" z3="-1.01320984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52305975" y3="-4.47902222" z3="-0.56958885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02003879" y3="-4.50983442" z3="0.72524096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15755297" y3="-3.43014253" z3="1.59274408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78189387" y3="-2.27749643" z3="1.13329995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50391521" y3="-3.27066419" z3="-2.04634743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39559939" y3="-5.33764849" z3="-1.22981975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.28295236" y3="-5.69135348" z3="1.17679302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75016788" y3="-3.4926757" z3="2.60282258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86750753" y3="-1.41627389" z3="1.79678301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48720473" y3="4.01105656" z3="0.22732544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86435636" y3="3.83384214" z3="0.19706985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45082261" y3="3.3852429" z3="-0.98087151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70060061" y3="3.12787081" z3="-2.12551937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32244796" y3="3.29400845" z3="-2.07327047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00497996" y3="4.32726676" z3="1.15512463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48118738" y3="4.02215379" z3="1.076041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89559614" y3="3.15035234" z3="-1.01107135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19822748" y3="2.79005198" z3="-3.03533412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28064318" y3="3.06687375" z3="-2.95470685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17672424" y3="-5.87444696" z3="2.36877124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.80096221" y3="-6.41580451" z3="0.32486227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42809487" y3="3.02923511" z3="-2.09346033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48085889" y3="3.07133374" z3="0.05289464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52876573" y3="0.15668539" z3="-2.14690416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85711711" y3="1.40299805" z3="-1.98579714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66940013" y3="0.08237958" z3="-2.99334667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11053616" y3="1.18595833" z3="-3.68040629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.1825396" y3="-0.87845471" z3="-3.09825441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.98454414" y3="1.11622357" z3="-4.33382839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32171143" y3="2.52018676" z3="-2.73479673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.41761303" y3="2.41436623" z3="-3.55706065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7908267" y3="3.47130066" z3="-2.65870242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75331669" y3="3.28560529" z3="-4.12657151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57450528" y3="3.89641617" z3="-0.28268696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77008844" y3="5.04858429" z3="-0.04090647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94488551" y3="3.94296294" z3="0.09989995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.49238984" y3="5.08303568" z3="0.63733893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56665168" y3="3.05512761" z3="-0.03002945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5476215" y3="5.09272289" z3="0.92437037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36855662" y3="6.21801501" z3="0.50430572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.70179428" y3="6.24154963" z3="0.83035862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.74054787" y3="7.09891898" z3="0.6713253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.15090583" y3="7.1447597" z3="1.25260122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.29765928" y3="-4.02247594" z3="-2.87332179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.50699507" y3="-5.04210298" z3="-2.51589379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.14795717" y3="-3.70700926" z3="-3.50749208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40479572" y3="-4.05543137" z3="-3.51798186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63473156" y3="-1.6680568" z3="-2.15574705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36083474" y3="-1.20069554" z3="-2.84501205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46461324" y3="-0.98757866" z3="-1.30561847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68256777" y3="-1.73682774" z3="-2.7047146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8881,-.9584,-.7212;6.5384,-1.9523,-1.6523;6.0216,-.9998,-1.5003;4.7231,1.4716,-1.113;4.262,.3078,-.5223;2.6052,2.7402,-1.0989;3.9679,2.7314,-.8581;2.3749,4.9934,-.2955;1.7776,3.8577,-.7889;1.7618,5.8701,-.0648;2.0089,1.6196,-1.6005;3.1338,.3612,.244;1.6845,.3844,-.5524;.6193,.7215,.4244;1.6018,-.8524,-1.419;1.1094,-2.4983,-1.2631;2.2546,-5.5215,-6.1648;1.9439,-5.0876,-5.2102;1.1359,-3.9473,-2.7856;1.91,-3.7077,-5.0617;1.6001,-5.9148,-4.1378;1.2115,-5.3385,-2.9353;1.515,-3.1053,-3.8561;2.1839,-3.0397,-5.882;1.6495,-7.0026,-4.2306;.9854,-5.973,-2.0743;.6923,-3.4003,-1.5548;-.3196,-3.8916,-.832;-.65,-4.8958,-1.1094;-.393,-3.59,.6145;-.4833,-3.1206,3.3723;-.7193,-4.6266,1.4977;-.1321,-2.3141,1.1233;-.175,-2.0809,2.4933;-.7551,-4.3939,2.8712;-.9035,-5.6333,1.1118;.0948,-1.4752,.4649;.0423,-1.0731,2.8576;-.9744,-5.2196,3.5537;-.5059,-2.9416,4.4512;1.4781,-1.7698,-3.8301;1.5341,-1.3568,-2.922;.3013,3.7337,-.8968;-2.0949,-3.0383,-1.739;-2.9041,-3.1674,-.6065;-3.1038,-2.2557,.2879;-3.8144,-.673,.4884;-4.4591,-.1128,-1.1714;-2.5348,.4165,1.2693;-5.2409,-.9944,1.6601;-3.407,-4.3636,-.3364;-4.1394,-4.5521,.8654;-3.6715,.3106,-1.8151;-5.2186,.6761,-1.0205;-4.9431,-.9407,-1.7189;-1.5881,.5113,.7074;-2.2866,.0429,2.2799;-2.9743,1.4243,1.3789;-5.7045,-.0333,1.9506;-6.0258,-1.6165,1.199;-4.8948,-1.4952,2.5814;-5.0649,-3.9532,.855;-3.5309,-4.281,1.7429;-4.3888,-5.6219,.8916;4.2763,-2.2,-.1793;4.1503,-3.3209,-1.0132;3.5231,-4.479,-.5696;3.02,-4.5098,.7252;3.1576,-3.4301,1.5927;3.7819,-2.2775,1.1333;4.5039,-3.2707,-2.0463;3.3956,-5.3376,-1.2298;2.283,-5.6914,1.1768;2.7502,-3.4927,2.6028;3.8675,-1.4163,1.7968;-.4872,4.0111,.2273;-1.8644,3.8338,.1971;-2.4508,3.3852,-.9809;-1.7006,3.1279,-2.1255;-.3224,3.294,-2.0733;-.005,4.3273,1.1551;-2.4812,4.0222,1.076;-3.8956,3.1504,-1.0111;-2.1982,2.7901,-3.0353;.2806,3.0669,-2.9547;2.1767,-5.8744,2.3688;1.801,-6.4158,.3249;-4.4281,3.0292,-2.0935;-4.4809,3.0713,.0529;6.5288,.1567,-2.1469;5.8571,1.403,-1.9858;7.6694,.0824,-2.9933;8.1105,1.186,-3.6804;8.1825,-.8785,-3.0983;8.9845,1.1162,-4.3338;6.3217,2.5202,-2.7348;7.4176,2.4144,-3.5571;5.7908,3.4713,-2.6587;7.7533,3.2856,-4.1266;4.5745,3.8964,-.2827;3.7701,5.0486,-.0409;5.9449,3.943,.0999;6.4924,5.083,.6373;6.5667,3.0551,-.03;7.5476,5.0927,.9244;4.3686,6.218,.5043;5.7018,6.2415,.8304;3.7405,7.0989,.6713;6.1509,7.1448,1.2526;-2.2977,-4.0225,-2.8733;-2.507,-5.0421,-2.5159;-3.148,-3.707,-3.5075;-1.4048,-4.0554,-3.518;-1.6347,-1.6681,-2.1557;-2.3608,-1.2007,-2.845;-1.4646,-.9876,-1.3056;-.6826,-1.7368,-2.7047;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662716819352</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002894170616 0.000425929764 0.019638357735 0.005346712045</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.056999473 -0.001029189 0.000154000 0.000314530 0.000368327 0.000392119 0.000465258 0.000514320 0.000633033 0.000709414 0.000889262 0.000915929 0.001095143 0.001175175 0.001325402 0.001360920 0.001422305 0.001551359 0.002196840 0.002349456 0.002464253 0.002597337 0.002814636 0.003265458 0.003502569 0.003827040 0.004290862 0.004586981 0.004695666 0.004803516 0.005204073 0.005247416 0.006076314 0.006223802 0.006765311 0.006868610 0.007114044 0.007384744 0.008168006 0.008515149 0.008893177 0.009358042 0.009714154 0.010332578 0.011036604 0.011280108 0.011539802 0.012419528 0.013209603 0.013597427 0.013915992 0.014572855 0.014921662 0.015460494 0.015754186 0.016552354 0.017042127 0.018365430 0.018701009 0.019387028 0.020317886 0.020378276 0.021083291 0.021786954 0.022236950 0.022718477 0.023361005 0.023826319 0.024490910 0.025850702 0.026528539 0.026707165 0.027079779 0.027315592 0.028133815 0.029010438 0.030836639 0.031420945 0.032760612 0.033936970 0.034604325 0.035848008 0.039004013 0.039417660 0.041926061 0.045364178 0.045618270 0.046693704 0.048568543 0.049625552 0.049793993 0.050679425 0.051533589 0.052103270 0.052284297 0.052386884 0.052700116 0.053357101 0.054766640 0.055987766 0.056330270 0.056669408 0.056803732 0.056978176 0.057687664 0.058485142 0.059204744 0.059668766 0.060891535 0.061986910 0.062662088 0.064191467 0.064519037 0.064968208 0.065891033 0.067264408 0.067882083 0.068905762 0.070504115 0.071946918 0.072501414 0.072639984 0.072964764 0.075396486 0.078520868 0.080735278 0.081527408 0.083214363 0.084027314 0.086891591 0.088677352 0.089348459 0.089792739 0.091286601 0.093270602 0.094558900 0.095458648 0.096169252 0.096811186 0.098342608 0.100077033 0.100587726 0.102580966 0.103651258 0.104115577 0.106240050 0.108620827 0.110620294 0.112112101 0.112433191 0.113658437 0.114384856 0.116777738 0.116993839 0.118132317 0.118486407 0.120336398 0.121805622 0.124729601 0.125528604 0.128428654 0.128891140 0.130706776 0.133439889 0.136188617 0.137687969 0.138612233 0.139608045 0.140045597 0.142531837 0.143730747 0.145673033 0.146727614 0.151772838 0.153391623 0.154021835 0.160135769 0.161021036 0.168454621 0.171309226 0.175866630 0.178776007 0.181373369 0.183904062 0.188831687 0.189726332 0.191674482 0.201102108 0.202156996 0.206258309 0.206893995 0.207223607 0.212056834 0.212483237 0.213463488 0.215617026 0.216552269 0.218281997 0.220614011 0.224210429 0.225413134 0.231833408 0.234530859 0.235380126 0.238339411 0.246384333 0.248905187 0.251569767 0.256494704 0.257173641 0.258155025 0.262378002 0.271562689 0.282787894 0.291830194 0.299766643 0.299931721 0.300951423 0.307014612 0.307769693 0.309756232 0.319547163 0.321320617 0.326284243 0.329991441 0.335469034 0.347652917 0.351978138 0.355586842 0.360375192 0.361483117 0.364077366 0.384341395 0.406737593 0.412453471 0.430201307 0.432215602 0.435244790 0.450544884 0.464477599 0.474575820 0.478761662 0.480308261 0.486597935 0.498880832 0.503646849 0.514081396 0.516647736 0.543711358 0.566906019 0.567654787 0.586466839 0.591847548 0.605653423 0.643946456 0.645270468 0.667838331 0.675558758 0.687082363 0.703474470 0.704334804 0.704985638 0.708868223 0.717100727 0.733277806 0.737958451 0.738813866 0.747384966 0.750749127 0.771605965 0.775962575 0.808610052 0.821665106 0.823857307 0.828803770 0.833915290 0.847046961 0.849197623 0.850980942 0.854463554 0.863259142 0.867462782 0.875191661 0.884680622 0.887692787 0.890969336 0.893182504 0.900904977 0.910047389 0.916459293 0.918910284 0.924409087 0.931715396 0.935137571 0.955611912 0.962098353 0.965034663 0.969854750 0.976009237 0.982362810 0.998567241 1.008005356 1.014858526 1.021107922 1.040028012 1.055031725 1.069385197 1.071991897 1.079267410 1.087290827 1.103467425 1.110261818 1.111603574 1.118597289 1.122501590 1.123512090 1.141810082 1.148599485 1.161703479 1.170016614 1.176608647 1.187161190 1.200716343 1.221119896 1.231385271 1.258051323 1.296369514 1.297709683 1.314654327 1.326362876 1.326723844 1.329920959 1.331327921 1.334670292 1.341954679 1.348554032 1.365235928 1.379927061 1.381267684 1.381586606 1.427508821 1.510740457 1.557944624 1.684706509 1.920471391</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">192</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88583506" y3="-0.95997116" z3="-0.72708543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5352145" y3="-1.95181994" z3="-1.66272784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.01843979" y3="-0.99972152" z3="-1.50804484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72047274" y3="1.47106423" z3="-1.11338947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2598414" y3="0.30591398" z3="-0.52523504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60275907" y3="2.7394776" z3="-1.0973536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96501717" y3="2.73014938" z3="-0.85537247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37267913" y3="4.99094226" z3="-0.28982378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77537301" y3="3.85667298" z3="-0.78660764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75963611" y3="5.86739467" z3="-0.057931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00667693" y3="1.61965768" z3="-1.60122254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13177573" y3="0.35787402" z3="0.24142196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68286038" y3="0.38243016" z3="-0.55510775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61773579" y3="0.71803715" z3="0.42218118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60043896" y3="-0.85322872" z3="-1.42310702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.11086273" y3="-2.50041525" z3="-1.26341867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.25421203" y3="-5.53022195" z3="-6.16128167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.9434605" y3="-5.09488077" z3="-5.20726138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13557471" y3="-3.95103801" z3="-2.78454465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.91030181" y3="-3.71465123" z3="-5.06053037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59849535" y3="-5.92056005" z3="-4.13406809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.21007238" y3="-5.3425096" z3="-2.93242791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51487999" y3="-3.11040229" z3="-3.85593651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.18510923" y3="-3.04792264" z3="-5.88161431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64702104" y3="-7.0085366" z3="-4.22562822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98355184" y3="-5.97596855" z3="-2.07071957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69272463" y3="-3.40170459" z3="-1.55433095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.31734439" y3="-3.89297428" z3="-0.82922938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.64907282" y3="-4.89676044" z3="-1.10587545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38973344" y3="-3.589831" z3="0.61677863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.47492843" y3="-3.11829096" z3="3.37430946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.7103059" y3="-4.62735079" z3="1.50155088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.13190735" y3="-2.31235961" z3="1.12392253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.17113703" y3="-2.07885682" z3="2.49410417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.74380731" y3="-4.39342281" z3="2.87491257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89077471" y3="-5.63611166" z3="1.11745099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09065456" y3="-1.47290799" z3="0.46468921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04436033" y3="-1.0703147" z3="2.85710316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.96003516" y3="-5.21888941" z3="3.55786003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.49424767" y3="-2.93927454" z3="4.45325586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47740841" y3="-1.77483488" z3="-3.83088466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53613384" y3="-1.36117395" z3="-2.92523308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29893851" y3="3.73449944" z3="-0.89702159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09615385" y3="-3.03884552" z3="-1.73707254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90261467" y3="-3.16359463" z3="-0.6025763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10133084" y3="-2.24657999" z3="0.28765792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81346426" y3="-0.66550644" z3="0.48594832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.44992059" y3="-0.10673396" z3="-1.17961764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53609954" y3="0.42184771" z3="1.26871762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.2398214" y3="-0.98450919" z3="1.65127262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40499467" y3="-4.35881165" z3="-0.3269223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1346024" y3="-4.5438223" z3="0.87654488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.66027346" y3="0.31923756" z3="-1.81790318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21501917" y3="0.67630566" z3="-1.02898292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.92349135" y3="-0.93969144" z3="-1.73254806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58707978" y3="0.51787556" z3="0.70793572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2867363" y3="0.04887431" z3="2.27550453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97258032" y3="1.43191334" z3="1.37791347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.70482781" y3="-0.02442546" z3="1.93957751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.02435332" y3="-1.60718291" z3="1.18205058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89871092" y3="-1.48564626" z3="2.57391978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06040023" y3="-3.94565458" z3="0.86746665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52432064" y3="-4.27136345" z3="1.75110129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.38382976" y3="-5.61249255" z3="0.90558683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27575652" y3="-2.20250553" z3="-0.18513057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15131695" y3="-3.3240046" z3="-1.01835496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52602157" y3="-4.48288125" z3="-0.57375315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02330991" y3="-4.51383825" z3="0.72121385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15884546" y3="-3.43328765" z3="1.58781323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7814102" y3="-2.28008198" z3="1.12744222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50446589" y3="-3.27384739" z3="-2.05161856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3986368" y3="-5.3408977" z3="-1.23367747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.28803411" y3="-5.69569539" z3="1.17343196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75085334" y3="-3.49501616" z3="2.597788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86534405" y3="-1.41804336" z3="1.79006883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49069734" y3="4.01030951" z3="0.22746147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86794628" y3="3.83434773" z3="0.19492636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45332668" y3="3.38902642" z3="-0.98556819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.70181044" y3="3.1327133" z3="-2.12991601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32343306" y3="3.29713346" z3="-2.07500456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.00910158" y3="4.32352102" z3="1.15742364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.48598516" y3="4.02115713" z3="1.07408106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89941981" y3="3.15714898" z3="-1.0200461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.198723" y3="2.79737662" z3="-3.04159319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28174512" y3="3.06929001" z3="-2.95358288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18232239" y3="-5.87856829" z3="2.36520767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.8063042" y3="-6.42024556" z3="0.32168556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.43044522" y3="3.03671748" z3="-2.10176977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48563101" y3="3.07697202" z3="0.04316628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52493176" y3="0.15824269" z3="-2.15255569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.8538366" y3="1.40449037" z3="-1.98734723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66459811" y3="0.08562191" z3="-3.00063681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.10528599" y3="1.19080735" z3="-3.68535552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17740357" y3="-0.87515679" z3="-3.10863015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.97853818" y3="1.12235639" z3="-4.34006914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.31805237" y3="2.52352292" z3="-2.73377696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.41290574" y3="2.41925078" z3="-3.55788217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.78752704" y3="3.47473127" z3="-2.65439716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.74825709" y3="3.29176386" z3="-4.12562611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57125589" y3="3.89351154" z3="-0.27612254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76700257" y3="5.04503773" z3="-0.03238032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94091504" y3="3.93880464" z3="0.1085518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.48774991" y3="5.07699929" z3="0.65074255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56274584" y3="3.05141139" z3="-0.02352338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.54254807" y3="5.08567206" z3="0.93940206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.36484464" y3="6.21261962" z3="0.51734555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69736069" y3="6.23488575" z3="0.84591162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73708229" y3="7.09292363" z3="0.68510282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.14603675" y3="7.13656405" z3="1.27190598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30114408" y3="-4.02735086" z3="-2.86773176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51247169" y3="-5.04553593" z3="-2.50545786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15090674" y3="-3.71206025" z3="-3.50242435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.40877438" y3="-4.06419888" z3="-3.51285491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63484989" y3="-1.67056316" z3="-2.15916626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36106937" y3="-1.20423859" z3="-2.84866136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46251312" y3="-0.98779133" z3="-1.31141649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68293067" y3="-1.74285611" z3="-2.70878074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8858,-.96,-.7271;6.5352,-1.9518,-1.6627;6.0184,-.9997,-1.508;4.7205,1.4711,-1.1134;4.2598,.3059,-.5252;2.6028,2.7395,-1.0974;3.965,2.7301,-.8554;2.3727,4.9909,-.2898;1.7754,3.8567,-.7866;1.7596,5.8674,-.0579;2.0067,1.6197,-1.6012;3.1318,.3579,.2414;1.6829,.3824,-.5551;.6177,.718,.4222;1.6004,-.8532,-1.4231;1.1109,-2.5004,-1.2634;2.2542,-5.5302,-6.1613;1.9435,-5.0949,-5.2073;1.1356,-3.951,-2.7845;1.9103,-3.7147,-5.0605;1.5985,-5.9206,-4.1341;1.2101,-5.3425,-2.9324;1.5149,-3.1104,-3.8559;2.1851,-3.0479,-5.8816;1.647,-7.0085,-4.2256;.9836,-5.976,-2.0707;.6927,-3.4017,-1.5543;-.3173,-3.893,-.8292;-.6491,-4.8968,-1.1059;-.3897,-3.5898,.6168;-.4749,-3.1183,3.3743;-.7103,-4.6274,1.5016;-.1319,-2.3124,1.1239;-.1711,-2.0789,2.4941;-.7438,-4.3934,2.8749;-.8908,-5.6361,1.1175;.0907,-1.4729,.4647;.0444,-1.0703,2.8571;-.96,-5.2189,3.5579;-.4942,-2.9393,4.4533;1.4774,-1.7748,-3.8309;1.5361,-1.3612,-2.9252;.2989,3.7345,-.897;-2.0962,-3.0388,-1.7371;-2.9026,-3.1636,-.6026;-3.1013,-2.2466,.2877;-3.8135,-.6655,.4859;-4.4499,-.1067,-1.1796;-2.5361,.4218,1.2687;-5.2398,-.9845,1.6513;-3.405,-4.3588,-.3269;-4.1346,-4.5438,.8765;-3.6603,.3192,-1.8179;-5.215,.6763,-1.029;-4.9235,-.9397,-1.7325;-1.5871,.5179,.7079;-2.2867,.0489,2.2755;-2.9726,1.4319,1.3779;-5.7048,-.0244,1.9396;-6.0244,-1.6072,1.1821;-4.8987,-1.4856,2.5739;-5.0604,-3.9457,.8675;-3.5243,-4.2714,1.7511;-4.3838,-5.6125,.9056;4.2758,-2.2025,-.1851;4.1513,-3.324,-1.0184;3.526,-4.4829,-.5738;3.0233,-4.5138,.7212;3.1588,-3.4333,1.5878;3.7814,-2.2801,1.1274;4.5045,-3.2738,-2.0516;3.3986,-5.3409,-1.2337;2.288,-5.6957,1.1734;2.7509,-3.495,2.5978;3.8653,-1.418,1.7901;-.4907,4.0103,.2275;-1.8679,3.8343,.1949;-2.4533,3.389,-.9856;-1.7018,3.1327,-2.1299;-.3234,3.2971,-2.075;-.0091,4.3235,1.1574;-2.486,4.0212,1.0741;-3.8994,3.1571,-1.02;-2.1987,2.7974,-3.0416;.2817,3.0693,-2.9536;2.1823,-5.8786,2.3652;1.8063,-6.4202,.3217;-4.4304,3.0367,-2.1018;-4.4856,3.077,.0432;6.5249,.1582,-2.1526;5.8538,1.4045,-1.9873;7.6646,.0856,-3.0006;8.1053,1.1908,-3.6854;8.1774,-.8752,-3.1086;8.9785,1.1224,-4.3401;6.3181,2.5235,-2.7338;7.4129,2.4193,-3.5579;5.7875,3.4747,-2.6544;7.7483,3.2918,-4.1256;4.5713,3.8935,-.2761;3.767,5.045,-.0324;5.9409,3.9388,.1086;6.4877,5.077,.6507;6.5627,3.0514,-.0235;7.5425,5.0857,.9394;4.3648,6.2126,.5173;5.6974,6.2349,.8459;3.7371,7.0929,.6851;6.146,7.1366,1.2719;-2.3011,-4.0274,-2.8677;-2.5125,-5.0455,-2.5055;-3.1509,-3.7121,-3.5024;-1.4088,-4.0642,-3.5129;-1.6348,-1.6706,-2.1592;-2.3611,-1.2042,-2.8487;-1.4625,-.9878,-1.3114;-.6829,-1.7429,-2.7088;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662711038909</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002849456179 0.000405891347 0.025100276597 0.005337922884</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057019952 -0.000934597 0.000099961 0.000320846 0.000368303 0.000394234 0.000463511 0.000513134 0.000632453 0.000710997 0.000890375 0.000914122 0.001097340 0.001176659 0.001325206 0.001367881 0.001422178 0.001551997 0.002199059 0.002349772 0.002463604 0.002598418 0.002815267 0.003268357 0.003502359 0.003828709 0.004290044 0.004585992 0.004711445 0.004812916 0.005204547 0.005251675 0.006113688 0.006223503 0.006767285 0.006890053 0.007125718 0.007384898 0.008169484 0.008514601 0.008889761 0.009359373 0.009714145 0.010349569 0.011045010 0.011288324 0.011542963 0.012420010 0.013211234 0.013597611 0.013923070 0.014573569 0.014921740 0.015460255 0.015755495 0.016552673 0.017051570 0.018395813 0.018716792 0.019394904 0.020319470 0.020378661 0.021088695 0.021789057 0.022236897 0.022721248 0.023361019 0.023829810 0.024492218 0.025851616 0.026534753 0.026746107 0.027092696 0.027319438 0.028135561 0.029013018 0.030837883 0.031429412 0.032762348 0.033939020 0.034605655 0.035862267 0.039005491 0.039419012 0.041925934 0.045364013 0.045639932 0.046701914 0.048572372 0.049625641 0.049794571 0.050692256 0.051533606 0.052105423 0.052284318 0.052387226 0.052701645 0.053359369 0.054778661 0.055991642 0.056334198 0.056673924 0.056848040 0.056980653 0.057695798 0.058497460 0.059205530 0.059669208 0.060911363 0.061991103 0.062662029 0.064192442 0.064519012 0.064972934 0.065915989 0.067287969 0.067889721 0.068912630 0.070507302 0.071975909 0.072504935 0.072653988 0.072971518 0.075396347 0.078522771 0.080747581 0.081527531 0.083222871 0.084026627 0.086954376 0.088702487 0.089348564 0.089792838 0.091288725 0.093275328 0.094558683 0.095461689 0.096169557 0.096811209 0.098371318 0.100082801 0.100593653 0.102585477 0.103652654 0.104114730 0.106239834 0.108620913 0.110620568 0.112136909 0.112487315 0.113659726 0.114401464 0.116794983 0.116994426 0.118171245 0.118489196 0.120336981 0.121805472 0.124729704 0.125529310 0.128431750 0.128891711 0.130707402 0.133450902 0.136206459 0.137687679 0.138614445 0.139608101 0.140057806 0.142760017 0.143882982 0.145679196 0.146727109 0.151773855 0.153391388 0.154023931 0.160161377 0.161024865 0.168455119 0.171309471 0.175866592 0.178776316 0.181373381 0.183915647 0.188831583 0.189726843 0.191696029 0.201122065 0.202158855 0.206260198 0.206895780 0.207224013 0.212075085 0.212483926 0.213466213 0.216210122 0.216557446 0.218282026 0.220634621 0.224216868 0.225416475 0.231835740 0.234530847 0.235380173 0.238340432 0.246387737 0.248997080 0.251610841 0.256495077 0.257173933 0.258158876 0.262402219 0.271563576 0.282804286 0.291842391 0.299788456 0.299932750 0.300952489 0.307014846 0.307770515 0.309759863 0.319649776 0.321322293 0.326286599 0.330017973 0.335468967 0.347660114 0.351979108 0.355588202 0.360376968 0.361483104 0.364077378 0.384344656 0.406737592 0.412565284 0.430203088 0.432309932 0.435244762 0.450555838 0.464479060 0.474625186 0.478763828 0.480308979 0.486598664 0.498882631 0.503683543 0.514107764 0.516692475 0.543714841 0.566906136 0.567654721 0.586466850 0.591847456 0.605653661 0.643984005 0.645275710 0.667840192 0.675559047 0.687124991 0.703482654 0.704336256 0.705115862 0.708874466 0.717100971 0.733286406 0.737962160 0.738985544 0.747385307 0.750749751 0.771606044 0.775962728 0.808616760 0.821666310 0.823862500 0.828836649 0.833918718 0.847047533 0.849230499 0.851074200 0.854464106 0.863260868 0.867462879 0.875191532 0.884856611 0.887701980 0.891034597 0.893185091 0.900921401 0.910056991 0.916920092 0.918988201 0.924411118 0.931718973 0.935137578 0.955658229 0.962432423 0.965034706 0.969868771 0.976043663 0.982364236 0.998573291 1.008616547 1.014859172 1.021108263 1.040028023 1.055031811 1.069389772 1.071991965 1.079272906 1.087293328 1.103476904 1.110262811 1.111604144 1.118620179 1.122502029 1.123512061 1.141811811 1.148615663 1.161709694 1.170022765 1.176612280 1.187176294 1.200718955 1.221120687 1.231403231 1.258050872 1.296375108 1.297789463 1.314654402 1.326363791 1.326724861 1.329922151 1.331328978 1.334680929 1.341975811 1.348554722 1.365238573 1.379933329 1.381267696 1.381588804 1.427509965 1.510998397 1.557945010 1.684706532 1.920632036</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">193</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88565717" y3="-0.96021124" z3="-0.73178424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53466819" y3="-1.95034377" z3="-1.66965273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.01799519" y3="-0.99853865" z3="-1.51308748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72029947" y3="1.47132254" z3="-1.11375784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.25922861" y3="0.30509416" z3="-0.52824162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.602616" y3="2.73902276" z3="-1.09867452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96434067" y3="2.72954453" z3="-0.85408603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3693351" y3="4.98746118" z3="-0.28231555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77372487" y3="3.85480345" z3="-0.78511119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75533548" y3="5.86290541" z3="-0.04815258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.00862902" y3="1.61974863" z3="-1.60616329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13023005" y3="0.35554923" z3="0.23708658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68203189" y3="0.38265399" z3="-0.56116932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61646971" y3="0.720426" z3="0.41481778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.59856371" y3="-0.85291429" z3="-1.42923858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10954834" y3="-2.50014706" z3="-1.26728943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.2464519" y3="-5.54126637" z3="-6.16018659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.93723837" y3="-5.10385476" z3="-5.20666628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.13306436" y3="-3.95456969" z3="-2.78521201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.90584325" y3="-3.72343404" z3="-5.06246957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.59269023" y3="-5.9271454" z3="-4.13148154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20601228" y3="-5.34636053" z3="-2.93065878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.51278458" y3="-3.11649269" z3="-3.85850141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.18039325" y3="-3.05842491" z3="-5.88503005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.64023561" y3="-7.01533772" z3="-4.22086633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.98000098" y3="-5.97791445" z3="-2.06744603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69181446" y3="-3.4029689" z3="-1.55547826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.31817104" y3="-3.89225845" z3="-0.82884723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65019782" y3="-4.89664145" z3="-1.10368573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38739441" y3="-3.58870191" z3="0.61733847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.46556102" y3="-3.11539476" z3="3.37483408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70414176" y3="-4.62576612" z3="1.50368235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.129948" y3="-2.31080495" z3="1.12287323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16687191" y3="-2.07545715" z3="2.49283562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73342865" y3="-4.39139853" z3="2.8771678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88692257" y3="-5.63273576" z3="1.11963173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.089339" y3="-1.4717207" z3="0.46217749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.04788558" y3="-1.0664896" z3="2.85468641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94492301" y3="-5.21725228" z3="3.56204807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.48316679" y3="-2.93470514" z3="4.45362124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47875405" y3="-1.78096943" z3="-3.83672137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.533021" y3="-1.36474357" z3="-2.93023195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29774314" y3="3.73284123" z3="-0.89927867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09637125" y3="-3.0397504" z3="-1.73570752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90114932" y3="-3.16080666" z3="-0.59939079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09545373" y3="-2.24305558" z3="0.29006284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.80910597" y3="-0.66163108" z3="0.48360003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.44778809" y3="-0.10741408" z3="-1.1802725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53273311" y3="0.42936041" z3="1.2655438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23980907" y3="-0.97819494" z3="1.6501569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40474922" y3="-4.35442122" z3="-0.31978701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12978381" y3="-4.53558488" z3="0.88795092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.65868956" y3="0.3183146" z3="-1.819655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21155323" y3="0.67795224" z3="-1.03411174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.92433421" y3="-0.93793732" z3="-1.72905526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58602896" y3="0.52530474" z3="0.70316671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.2831888" y3="0.05526288" z3="2.2752944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97315362" y3="1.43654137" z3="1.37638542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.70160608" y3="-0.01577564" z3="1.93673433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.0247175" y3="-1.5993406" z3="1.18758895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.89937404" y3="-1.47885578" z3="2.57470879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05543465" y3="-3.93744147" z3="0.88000073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51569314" y3="-4.25871987" z3="1.75958239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37884874" y3="-5.60496216" z3="0.92277837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27631662" y3="-2.20320226" z3="-0.19032193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15152646" y3="-3.32441393" z3="-1.02369187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52707687" y3="-4.48351404" z3="-0.57870088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0259552" y3="-4.5150774" z3="0.71684301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16213905" y3="-3.43498613" z3="1.58362737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78355007" y3="-2.28142557" z3="1.12280084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50386163" y3="-3.2739866" z3="-2.05721578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.4001569" y3="-5.34229042" z3="-1.23841992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.29197838" y3="-5.69759182" z3="1.1698732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75575764" y3="-3.49763972" z3="2.59410562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86784814" y3="-1.41954038" z3="1.78537268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49518926" y3="4.01055418" z3="0.22155784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87267614" y3="3.83630295" z3="0.18496743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45503014" y3="3.38998124" z3="-0.9958052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.7003666" y3="3.13252721" z3="-2.13743957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.32183657" y3="3.29556587" z3="-2.07866927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.01655022" y3="4.32485643" z3="1.15164476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49295551" y3="4.02445682" z3="1.06184755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.90028867" y3="3.15698303" z3="-1.0321924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.19461977" y3="2.79652873" z3="-3.04960282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.28450342" y3="3.06849624" z3="-2.95818283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18843583" y3="-5.8809767" z3="2.36187793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.80915011" y3="-6.42229651" z3="0.31886325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42895177" y3="3.03623256" z3="-2.11624195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48920576" y3="3.07766266" z3="0.02972751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52446776" y3="0.16068702" z3="-2.15552955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85404485" y3="1.4067562" z3="-1.98701674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66348959" y3="0.08985657" z3="-3.00469571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.10439653" y3="1.19677798" z3="-3.68654964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17558355" y3="-0.87093108" z3="-3.11607574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.97695878" y3="1.12958902" z3="-4.34241562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3188877" y3="2.52792805" z3="-2.72979143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.4132889" y3="2.42549997" z3="-3.55459346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.7891657" y3="3.47929325" z3="-2.64682769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.74914077" y3="3.29965502" z3="-4.1194925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56897358" y3="3.890903" z3="-0.26951454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76339136" y3="5.04110123" z3="-0.02196777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93823894" y3="3.93486315" z3="0.1175094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4836355" y3="5.07077951" z3="0.6658463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56072269" y3="3.04816512" z3="-0.01761781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53806838" y3="5.07847768" z3="0.95644087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35958214" y3="6.20638162" z3="0.53465665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.69183322" y3="6.22745872" z3="0.86567675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.73072356" y3="7.08589573" z3="0.70667562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13921399" y3="7.1272686" z3="1.29700625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3041325" y3="-4.03083968" z3="-2.86346214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51724788" y3="-5.04742684" z3="-2.49909839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15391527" y3="-3.71590717" z3="-3.49876026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41227802" y3="-4.07151562" z3="-3.50926937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63476936" y3="-1.67263722" z3="-2.16253418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36214412" y3="-1.20791948" z3="-2.85261601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46003742" y3="-0.9870467" z3="-1.31728069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.684858" y3="-1.74690701" z3="-2.71425585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8857,-.9602,-.7318;6.5347,-1.9503,-1.6697;6.018,-.9985,-1.5131;4.7203,1.4713,-1.1138;4.2592,.3051,-.5282;2.6026,2.739,-1.0987;3.9643,2.7295,-.8541;2.3693,4.9875,-.2823;1.7737,3.8548,-.7851;1.7553,5.8629,-.0482;2.0086,1.6197,-1.6062;3.1302,.3555,.2371;1.682,.3827,-.5612;.6165,.7204,.4148;1.5986,-.8529,-1.4292;1.1095,-2.5001,-1.2673;2.2465,-5.5413,-6.1602;1.9372,-5.1039,-5.2067;1.1331,-3.9546,-2.7852;1.9058,-3.7234,-5.0625;1.5927,-5.9271,-4.1315;1.206,-5.3464,-2.9307;1.5128,-3.1165,-3.8585;2.1804,-3.0584,-5.885;1.6402,-7.0153,-4.2209;.98,-5.9779,-2.0674;.6918,-3.403,-1.5555;-.3182,-3.8923,-.8288;-.6502,-4.8966,-1.1037;-.3874,-3.5887,.6173;-.4656,-3.1154,3.3748;-.7041,-4.6258,1.5037;-.1299,-2.3108,1.1229;-.1669,-2.0755,2.4928;-.7334,-4.3914,2.8772;-.8869,-5.6327,1.1196;.0893,-1.4717,.4622;.0479,-1.0665,2.8547;-.9449,-5.2173,3.562;-.4832,-2.9347,4.4536;1.4788,-1.781,-3.8367;1.533,-1.3647,-2.9302;.2977,3.7328,-.8993;-2.0964,-3.0398,-1.7357;-2.9011,-3.1608,-.5994;-3.0955,-2.2431,.2901;-3.8091,-.6616,.4836;-4.4478,-.1074,-1.1803;-2.5327,.4294,1.2655;-5.2398,-.9782,1.6502;-3.4047,-4.3544,-.3198;-4.1298,-4.5356,.888;-3.6587,.3183,-1.8197;-5.2116,.678,-1.0341;-4.9243,-.9379,-1.7291;-1.586,.5253,.7032;-2.2832,.0553,2.2753;-2.9732,1.4365,1.3764;-5.7016,-.0158,1.9367;-6.0247,-1.5993,1.1876;-4.8994,-1.4789,2.5747;-5.0554,-3.9374,.88;-3.5157,-4.2587,1.7596;-4.3788,-5.605,.9228;4.2763,-2.2032,-.1903;4.1515,-3.3244,-1.0237;3.5271,-4.4835,-.5787;3.026,-4.5151,.7168;3.1621,-3.435,1.5836;3.7836,-2.2814,1.1228;4.5039,-3.274,-2.0572;3.4002,-5.3423,-1.2384;2.292,-5.6976,1.1699;2.7558,-3.4976,2.5941;3.8678,-1.4195,1.7854;-.4952,4.0106,.2216;-1.8727,3.8363,.185;-2.455,3.39,-.9958;-1.7004,3.1325,-2.1374;-.3218,3.2956,-2.0787;-.0166,4.3249,1.1516;-2.493,4.0245,1.0618;-3.9003,3.157,-1.0322;-2.1946,2.7965,-3.0496;.2845,3.0685,-2.9582;2.1884,-5.881,2.3619;1.8092,-6.4223,.3189;-4.429,3.0362,-2.1162;-4.4892,3.0777,.0297;6.5245,.1607,-2.1555;5.854,1.4068,-1.987;7.6635,.0899,-3.0047;8.1044,1.1968,-3.6865;8.1756,-.8709,-3.1161;8.977,1.1296,-4.3424;6.3189,2.5279,-2.7298;7.4133,2.4255,-3.5546;5.7892,3.4793,-2.6468;7.7491,3.2997,-4.1195;4.569,3.8909,-.2695;3.7634,5.0411,-.022;5.9382,3.9349,.1175;6.4836,5.0708,.6658;6.5607,3.0482,-.0176;7.5381,5.0785,.9564;4.3596,6.2064,.5347;5.6918,6.2275,.8657;3.7307,7.0859,.7067;6.1392,7.1273,1.297;-2.3041,-4.0308,-2.8635;-2.5172,-5.0474,-2.4991;-3.1539,-3.7159,-3.4988;-1.4123,-4.0715,-3.5093;-1.6348,-1.6726,-2.1625;-2.3621,-1.2079,-2.8526;-1.46,-.987,-1.3173;-.6849,-1.7469,-2.7143;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662710276390</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002743832961 0.000391332486 0.023766938897 0.005338842916</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057022326 -0.000958911 0.000047604 0.000324211 0.000368855 0.000393814 0.000459362 0.000514030 0.000633226 0.000712403 0.000889344 0.000913542 0.001096792 0.001177163 0.001325365 0.001365925 0.001422303 0.001552053 0.002201305 0.002352200 0.002463147 0.002602495 0.002816531 0.003281463 0.003506405 0.003828954 0.004295332 0.004587368 0.004715231 0.004821921 0.005204162 0.005256091 0.006152457 0.006223519 0.006767590 0.006915529 0.007134337 0.007392020 0.008169694 0.008514658 0.008886757 0.009363040 0.009714283 0.010358451 0.011045832 0.011302567 0.011541850 0.012421325 0.013213075 0.013598282 0.013925034 0.014573557 0.014922027 0.015460064 0.015757126 0.016553568 0.017059698 0.018436451 0.018737596 0.019402580 0.020319544 0.020385388 0.021088498 0.021790098 0.022237174 0.022727252 0.023362303 0.023831546 0.024491779 0.025851549 0.026542610 0.026802371 0.027114744 0.027338629 0.028136416 0.029016624 0.030837638 0.031448177 0.032768494 0.033942698 0.034608154 0.035867573 0.039008745 0.039419098 0.041926718 0.045363856 0.045665417 0.046705006 0.048577675 0.049629552 0.049796309 0.050699378 0.051533640 0.052112739 0.052284332 0.052388289 0.052702981 0.053361190 0.054801749 0.055995087 0.056334398 0.056674864 0.056866142 0.056982753 0.057704841 0.058509100 0.059206089 0.059669418 0.060921575 0.061996242 0.062661942 0.064196395 0.064519031 0.064974335 0.065932269 0.067323993 0.067895102 0.068915687 0.070509429 0.071992967 0.072505439 0.072678141 0.072982112 0.075396856 0.078526132 0.080758819 0.081527673 0.083240401 0.084028867 0.087005201 0.088711674 0.089349005 0.089792842 0.091291781 0.093281332 0.094558822 0.095464342 0.096169872 0.096811593 0.098385232 0.100087618 0.100593483 0.102586004 0.103653233 0.104119915 0.106243993 0.108621821 0.110624829 0.112151590 0.112529195 0.113662633 0.114438006 0.116802806 0.116999785 0.118218672 0.118491373 0.120343556 0.121814920 0.124738614 0.125538507 0.128434965 0.128894850 0.130708745 0.133460710 0.136228437 0.137687829 0.138614218 0.139608233 0.140065557 0.142955512 0.144050820 0.145684073 0.146727754 0.151776438 0.153391207 0.154031836 0.160238836 0.161027211 0.168456194 0.171310180 0.175867246 0.178778760 0.181373693 0.183930726 0.188832233 0.189728573 0.191710772 0.201142621 0.202160438 0.206262651 0.206897642 0.207224452 0.212094983 0.212487773 0.213466096 0.216549230 0.216832615 0.218285494 0.220660229 0.224245223 0.225420123 0.231837136 0.234530852 0.235380313 0.238341215 0.246387562 0.249003060 0.251617838 0.256495678 0.257175234 0.258162706 0.262422428 0.271563563 0.282823232 0.291849432 0.299801212 0.299934194 0.300955264 0.307014924 0.307770861 0.309760055 0.319702272 0.321322500 0.326286613 0.330022990 0.335473191 0.347666151 0.351980796 0.355588253 0.360385210 0.361486826 0.364078024 0.384347171 0.406739107 0.412706834 0.430203007 0.432361349 0.435250909 0.450574085 0.464479350 0.474636587 0.478764160 0.480309013 0.486599038 0.498883909 0.503696181 0.514133581 0.516741495 0.543724722 0.566906134 0.567655019 0.586470464 0.591849993 0.605655392 0.643994783 0.645278074 0.667842375 0.675559224 0.687172524 0.703484076 0.704336219 0.705285695 0.708875172 0.717102320 0.733332010 0.737962532 0.739070934 0.747400083 0.750749756 0.771606133 0.775962846 0.808628873 0.821667168 0.823866150 0.828863003 0.833920206 0.847051459 0.849250170 0.851166594 0.854464930 0.863261433 0.867462898 0.875191650 0.884933401 0.887703546 0.891101038 0.893185060 0.900937157 0.910057225 0.917426162 0.919421251 0.924413324 0.931726721 0.935139393 0.955734965 0.962679196 0.965034892 0.969871989 0.976051730 0.982365324 0.998580933 1.009168127 1.014866533 1.021108250 1.040028043 1.055031818 1.069409129 1.071998265 1.079273206 1.087296127 1.103481934 1.110263066 1.111604852 1.118658702 1.122502667 1.123513773 1.141811839 1.148637360 1.161717892 1.170024179 1.176614028 1.187184560 1.200723072 1.221122397 1.231415144 1.258058558 1.296375963 1.297844021 1.314655427 1.326379984 1.326749374 1.329923896 1.331331063 1.334681725 1.341992954 1.348555576 1.365248770 1.379933525 1.381269800 1.381593200 1.427510577 1.511046654 1.557945181 1.684710274 1.920697709</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">194</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88654281" y3="-0.9599379" z3="-0.73610072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53655416" y3="-1.9487267" z3="-1.67346047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.01959759" y3="-0.9971858" z3="-1.51633601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72152515" y3="1.4721273" z3="-1.11446879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.25960682" y3="0.30493752" z3="-0.53168387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60344741" y3="2.73932227" z3="-1.10093272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96479516" y3="2.72973139" z3="-0.85340046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36817295" y3="4.98514119" z3="-0.27967071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77370413" y3="3.85401179" z3="-0.78723575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.753463" y3="5.859584" z3="-0.04490666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01089271" y3="1.62067229" z3="-1.61208328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12916811" y3="0.35401015" z3="0.23167839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68259134" y3="0.3816834" z3="-0.56935248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61536718" y3="0.71819055" z3="0.40564446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60098129" y3="-0.85297015" z3="-1.43888219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1098701" y3="-2.5007172" z3="-1.27126905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.23426411" y3="-5.55029105" z3="-6.1619052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.92743" y3="-5.1109459" z3="-5.20847973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12922733" y3="-3.95697486" z3="-2.78746855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.89687419" y3="-3.73017458" z3="-5.0667106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.58490527" y3="-5.93214642" z3="-4.13109499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.20132766" y3="-5.34906323" z3="-2.93042481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.50637466" y3="-3.12084663" z3="-3.86306848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.16990134" y3="-3.06695375" z3="-5.89121093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6315314" y3="-7.0205006" z3="-4.21867266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9768825" y3="-5.9790203" z3="-2.06565905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.69046023" y3="-3.40288458" z3="-1.55791619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.31771672" y3="-3.89167263" z3="-0.82848778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65131051" y3="-4.89569014" z3="-1.10217918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38515299" y3="-3.58600119" z3="0.61732521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45857463" y3="-3.11134781" z3="3.37474256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69989026" y3="-4.62275405" z3="1.50478898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1279557" y3="-2.30733085" z3="1.12168659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.16119883" y3="-2.07241202" z3="2.49178844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72767299" y3="-4.38707979" z3="2.87798791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87910879" y3="-5.63344634" z3="1.12323108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0892059" y3="-1.4680687" z3="0.46056592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05378543" y3="-1.06287556" z3="2.85254207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93931823" y3="-5.21202946" z3="3.56267915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.47346513" y3="-2.9309844" z3="4.45349964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.47122664" y3="-1.785155" z3="-3.8428442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.53221812" y3="-1.3680176" z3="-2.93891767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.29787654" y3="3.73255646" z3="-0.90546231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.09887178" y3="-3.03831662" z3="-1.73344337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90094848" y3="-3.15889631" z3="-0.59543205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.0958" y3="-2.23832501" z3="0.29242646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81174209" y3="-0.6585632" z3="0.48788632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.45628674" y3="-0.10772382" z3="-1.17753842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53230474" y3="0.43409432" z3="1.26128125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.23280895" y3="-0.97518952" z3="1.66158555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40263991" y3="-4.35318501" z3="-0.31311754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1269749" y3="-4.53252676" z3="0.8944436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.66915448" y3="0.31333329" z3="-1.82243239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.21903621" y3="0.67809011" z3="-1.02935539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.93456862" y3="-0.94276568" z3="-1.72367649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58726833" y3="0.53141035" z3="0.69424661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.27486654" y3="0.06286252" z3="2.2669973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97122461" y3="1.44319834" z3="1.37128893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.69839569" y3="-0.013838" z3="1.94768056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01821338" y3="-1.60118967" z3="1.1991453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.88545676" y3="-1.46980726" z3="2.58426005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05308911" y3="-3.93460868" z3="0.88613227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51329933" y3="-4.25545724" z3="1.76533735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37549401" y3="-5.60139783" z3="0.92987632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2772683" y3="-2.20310384" z3="-0.19500575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15135777" y3="-3.32437" z3="-1.02835487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52757162" y3="-4.48377488" z3="-0.58255846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02799344" y3="-4.51516662" z3="0.71367405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16494559" y3="-3.4345942" z3="1.58022735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7858901" y3="-2.28108584" z3="1.11867208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50253208" y3="-3.27380996" z3="-2.06229594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39958251" y3="-5.34224844" z3="-1.24223321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.29525258" y3="-5.69798953" z3="1.16827187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75985368" y3="-3.49704676" z3="2.59129614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87125842" y3="-1.41927435" z3="1.78136284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49776283" y3="4.0097614" z3="0.21476964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87467471" y3="3.83422122" z3="0.17514882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45368924" y3="3.38687497" z3="-1.00753282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69620517" y3="3.12948327" z3="-2.14780283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31853099" y3="3.29499965" z3="-2.08669993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02116669" y3="4.32333323" z3="1.14720982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49776902" y3="4.02272741" z3="1.04998821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89884431" y3="3.15265591" z3="-1.04760412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18826966" y3="2.79287714" z3="-3.06164169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29106776" y3="3.06661114" z3="-2.96203534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19280008" y3="-5.8802734" z3="2.36055196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.81245522" y3="-6.4240888" z3="0.31829616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42382622" y3="3.02537635" z3="-2.13144771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49070293" y3="3.07784965" z3="0.01280258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.52688057" y3="0.16315441" z3="-2.15615925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.85662228" y3="1.40909728" z3="-1.98609766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.66701283" y3="0.0939018" z3="-3.00360439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.10928649" y3="1.20219685" z3="-3.68232788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.17897717" y3="-0.86668986" z3="-3.11605705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.98280886" y3="1.13626516" z3="-4.33664542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32296842" y3="2.53171629" z3="-2.72575928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.41852819" y3="2.43075801" z3="-3.549025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.79342576" y3="3.48293768" z3="-2.64183675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.75563805" y3="3.30597823" z3="-4.11155743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56783276" y3="3.88946881" z3="-0.26382325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7612625" y3="5.03827197" z3="-0.01482224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93575743" y3="3.93289192" z3="0.12726986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4785453" y3="5.06686897" z3="0.68230008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55918028" y3="3.04729558" z3="-0.00966569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.53176984" y3="5.07418724" z3="0.97641473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35519631" y3="6.20160351" z3="0.54803369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6858016" y3="6.22211758" z3="0.88404519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72563279" y3="7.07971526" z3="0.72041225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.13120485" y3="7.12029405" z3="1.32077319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.30805895" y3="-4.03011777" z3="-2.86023269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52119547" y3="-5.04648864" z3="-2.4944607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.15811272" y3="-3.71486653" z3="-3.49462067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.41688099" y3="-4.07141086" z3="-3.50666723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.63741946" y3="-1.67215351" z3="-2.16113444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.36531566" y3="-1.20763973" z3="-2.84982767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46195626" y3="-0.98670044" z3="-1.31625138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.68707868" y3="-1.74689292" z3="-2.71323812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8865,-.9599,-.7361;6.5366,-1.9487,-1.6735;6.0196,-.9972,-1.5163;4.7215,1.4721,-1.1145;4.2596,.3049,-.5317;2.6034,2.7393,-1.1009;3.9648,2.7297,-.8534;2.3682,4.9851,-.2797;1.7737,3.854,-.7872;1.7535,5.8596,-.0449;2.0109,1.6207,-1.6121;3.1292,.354,.2317;1.6826,.3817,-.5694;.6154,.7182,.4056;1.601,-.853,-1.4389;1.1099,-2.5007,-1.2713;2.2343,-5.5503,-6.1619;1.9274,-5.1109,-5.2085;1.1292,-3.957,-2.7875;1.8969,-3.7302,-5.0667;1.5849,-5.9321,-4.1311;1.2013,-5.3491,-2.9304;1.5064,-3.1208,-3.8631;2.1699,-3.067,-5.8912;1.6315,-7.0205,-4.2187;.9769,-5.979,-2.0657;.6905,-3.4029,-1.5579;-.3177,-3.8917,-.8285;-.6513,-4.8957,-1.1022;-.3852,-3.586,.6173;-.4586,-3.1113,3.3747;-.6999,-4.6228,1.5048;-.128,-2.3073,1.1217;-.1612,-2.0724,2.4918;-.7277,-4.3871,2.878;-.8791,-5.6334,1.1232;.0892,-1.4681,.4606;.0538,-1.0629,2.8525;-.9393,-5.212,3.5627;-.4735,-2.931,4.4535;1.4712,-1.7852,-3.8428;1.5322,-1.368,-2.9389;.2979,3.7326,-.9055;-2.0989,-3.0383,-1.7334;-2.9009,-3.1589,-.5954;-3.0958,-2.2383,.2924;-3.8117,-.6586,.4879;-4.4563,-.1077,-1.1775;-2.5323,.4341,1.2613;-5.2328,-.9752,1.6616;-3.4026,-4.3532,-.3131;-4.127,-4.5325,.8944;-3.6692,.3133,-1.8224;-5.219,.6781,-1.0294;-4.9346,-.9428,-1.7237;-1.5873,.5314,.6942;-2.2749,.0629,2.267;-2.9712,1.4432,1.3713;-5.6984,-.0138,1.9477;-6.0182,-1.6012,1.1991;-4.8855,-1.4698,2.5843;-5.0531,-3.9346,.8861;-3.5133,-4.2555,1.7653;-4.3755,-5.6014,.9299;4.2773,-2.2031,-.195;4.1514,-3.3244,-1.0284;3.5276,-4.4838,-.5826;3.028,-4.5152,.7137;3.1649,-3.4346,1.5802;3.7859,-2.2811,1.1187;4.5025,-3.2738,-2.0623;3.3996,-5.3422,-1.2422;2.2953,-5.698,1.1683;2.7599,-3.497,2.5913;3.8713,-1.4193,1.7814;-.4978,4.0098,.2148;-1.8747,3.8342,.1751;-2.4537,3.3869,-1.0075;-1.6962,3.1295,-2.1478;-.3185,3.295,-2.0867;-.0212,4.3233,1.1472;-2.4978,4.0227,1.05;-3.8988,3.1527,-1.0476;-2.1883,2.7929,-3.0616;.2911,3.0666,-2.962;2.1928,-5.8803,2.3606;1.8125,-6.4241,.3183;-4.4238,3.0254,-2.1314;-4.4907,3.0778,.0128;6.5269,.1632,-2.1562;5.8566,1.4091,-1.9861;7.667,.0939,-3.0036;8.1093,1.2022,-3.6823;8.179,-.8667,-3.1161;8.9828,1.1363,-4.3366;6.323,2.5317,-2.7258;7.4185,2.4308,-3.549;5.7934,3.4829,-2.6418;7.7556,3.306,-4.1116;4.5678,3.8895,-.2638;3.7613,5.0383,-.0148;5.9358,3.9329,.1273;6.4785,5.0669,.6823;6.5592,3.0473,-.0097;7.5318,5.0742,.9764;4.3552,6.2016,.548;5.6858,6.2221,.884;3.7256,7.0797,.7204;6.1312,7.1203,1.3208;-2.3081,-4.0301,-2.8602;-2.5212,-5.0465,-2.4945;-3.1581,-3.7149,-3.4946;-1.4169,-4.0714,-3.5067;-1.6374,-1.6722,-2.1611;-2.3653,-1.2076,-2.8498;-1.462,-.9867,-1.3163;-.6871,-1.7469,-2.7132;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662716559487</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002820743950 0.000428791005 0.024305087923 0.005336746582</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057024217 -0.001076512 0.000052096 0.000333863 0.000370626 0.000392317 0.000454627 0.000515238 0.000634240 0.000715545 0.000890463 0.000913545 0.001097341 0.001178116 0.001325529 0.001367594 0.001422385 0.001555842 0.002208519 0.002356305 0.002463458 0.002604258 0.002820855 0.003312107 0.003505051 0.003831063 0.004293525 0.004589670 0.004714868 0.004823719 0.005204668 0.005257345 0.006197408 0.006223958 0.006767427 0.006926353 0.007134143 0.007411267 0.008169955 0.008517743 0.008886389 0.009361010 0.009715590 0.010360202 0.011046489 0.011297602 0.011543179 0.012425563 0.013212832 0.013605021 0.013926697 0.014574287 0.014922166 0.015460590 0.015756809 0.016554694 0.017067939 0.018474646 0.018779140 0.019407200 0.020320557 0.020393436 0.021093411 0.021794688 0.022237957 0.022730935 0.023363422 0.023831373 0.024491834 0.025851547 0.026546230 0.026856551 0.027139907 0.027382590 0.028138044 0.029017244 0.030837980 0.031467584 0.032767808 0.033956515 0.034612445 0.035874794 0.039009250 0.039421215 0.041926415 0.045364711 0.045676686 0.046705946 0.048587630 0.049636621 0.049798631 0.050702071 0.051533730 0.052122622 0.052284371 0.052388632 0.052705524 0.053362193 0.054832031 0.055996571 0.056334752 0.056676273 0.056881397 0.056984921 0.057710597 0.058522343 0.059206373 0.059669590 0.060923209 0.062000907 0.062661896 0.064203170 0.064519312 0.064974258 0.065935008 0.067357981 0.067896065 0.068915917 0.070512469 0.072001620 0.072505383 0.072686512 0.072986078 0.075400548 0.078531620 0.080771673 0.081527736 0.083256474 0.084044381 0.087059396 0.088713616 0.089349264 0.089793474 0.091292173 0.093285461 0.094559695 0.095466379 0.096170166 0.096811321 0.098387551 0.100088282 0.100593631 0.102586005 0.103653967 0.104129714 0.106261627 0.108626370 0.110630630 0.112164050 0.112548116 0.113667043 0.114480181 0.116805068 0.117007198 0.118248941 0.118496624 0.120357530 0.121830286 0.124773754 0.125544494 0.128436812 0.128900122 0.130712789 0.133474486 0.136244875 0.137688895 0.138614243 0.139608675 0.140075506 0.143104473 0.144199495 0.145684184 0.146729950 0.151779462 0.153391202 0.154034586 0.160354917 0.161029901 0.168456483 0.171310127 0.175867628 0.178781025 0.181374070 0.183934664 0.188832670 0.189736310 0.191726595 0.201160490 0.202161549 0.206263768 0.206898698 0.207224679 0.212112925 0.212488900 0.213470677 0.216560271 0.217474804 0.218334569 0.220686253 0.224274674 0.225422672 0.231838497 0.234530867 0.235380595 0.238341421 0.246387882 0.249009391 0.251623036 0.256495650 0.257176404 0.258174222 0.262435891 0.271563571 0.282833867 0.291850501 0.299807267 0.299940308 0.300959041 0.307015934 0.307770921 0.309760558 0.319748238 0.321322540 0.326287632 0.330025219 0.335484334 0.347676658 0.351981743 0.355588289 0.360385428 0.361505022 0.364078643 0.384355386 0.406739237 0.412864789 0.430203467 0.432443788 0.435250474 0.450611788 0.464489156 0.474649279 0.478764243 0.480309430 0.486600709 0.498886484 0.503707602 0.514183210 0.516766278 0.543724508 0.566906615 0.567655419 0.586477698 0.591851477 0.605655359 0.644020972 0.645281544 0.667854595 0.675560462 0.687214870 0.703490026 0.704336397 0.705388388 0.708910742 0.717103446 0.733413398 0.737963050 0.739116230 0.747409728 0.750749780 0.771606164 0.775962999 0.808629948 0.821670140 0.823870253 0.828876856 0.833923344 0.847057706 0.849255345 0.851254491 0.854467299 0.863261854 0.867463093 0.875202051 0.884935157 0.887712686 0.891140117 0.893189206 0.900940163 0.910059589 0.917689360 0.919949815 0.924416327 0.931732242 0.935157921 0.955810002 0.962911441 0.965035372 0.969896820 0.976140929 0.982368422 0.998586280 1.009703579 1.014876123 1.021109157 1.040028055 1.055032386 1.069448915 1.072025939 1.079273134 1.087296546 1.103483961 1.110263112 1.111604842 1.118689312 1.122502862 1.123514112 1.141813708 1.148663248 1.161726672 1.170024169 1.176614635 1.187184677 1.200724032 1.221134245 1.231425289 1.258073767 1.296376532 1.297942494 1.314656474 1.326389121 1.326770564 1.329925552 1.331333412 1.334694679 1.342022937 1.348560242 1.365257868 1.379934413 1.381270623 1.381602128 1.427510645 1.511348617 1.557948656 1.684710581 1.920815671</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">195</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.88898967" y3="-0.95952062" z3="-0.73610274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.53986514" y3="-1.94791584" z3="-1.67265037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02303296" y3="-0.99633194" z3="-1.51498633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72457926" y3="1.47283651" z3="-1.11265917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26148506" y3="0.30508966" z3="-0.53190872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60643475" y3="2.73891636" z3="-1.10389108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96686958" y3="2.7298753" z3="-0.85264816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.36762459" y3="4.98343805" z3="-0.2795826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77512589" y3="3.85258101" z3="-0.78993607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75194803" y3="5.85731548" z3="-0.04466817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01616147" y3="1.62041033" z3="-1.61767593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12909343" y3="0.35314321" z3="0.2286147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6847248" y3="0.3812398" z3="-0.57639839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61472364" y3="0.7181365" z3="0.39509276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60535412" y3="-0.85340602" z3="-1.44600449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10921199" y3="-2.499067" z3="-1.27534837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.22140326" y3="-5.55491159" z3="-6.16520002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.91711176" y3="-5.11431465" z3="-5.21153643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.12513033" y3="-3.95703872" z3="-2.78991958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.88660516" y3="-3.73338574" z3="-5.07166236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.57802437" y3="-5.93406192" z3="-4.13195871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19743434" y3="-5.34931898" z3="-2.9310931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49961579" y3="-3.12248736" z3="-3.86770597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.15710824" y3="-3.07119101" z3="-5.89779575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.62499726" y3="-7.02255196" z3="-4.21806108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97553728" y3="-5.97801967" z3="-2.06473138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68865818" y3="-3.40156881" z3="-1.56011538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.31929503" y3="-3.88860849" z3="-0.8292658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65301169" y3="-4.89309517" z3="-1.10162626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38387253" y3="-3.58321192" z3="0.61670163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45348441" y3="-3.10710154" z3="3.37395204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69784349" y3="-4.6195973" z3="1.5051682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12478397" y3="-2.30477416" z3="1.12004401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15743491" y3="-2.06805148" z3="2.48991538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72295982" y3="-4.38392787" z3="2.87852179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88290691" y3="-5.62603622" z3="1.12231112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09170794" y3="-1.4658114" z3="0.45812534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.05870796" y3="-1.05882618" z3="2.85025817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93260598" y3="-5.20907411" z3="3.56507954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4674935" y3="-2.92548206" z3="4.45266024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.46539111" y3="-1.78685601" z3="-3.84973859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52697496" y3="-1.36825606" z3="-2.94504495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.299791" y3="3.72999151" z3="-0.91066865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10039197" y3="-3.03643634" z3="-1.73162082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90203706" y3="-3.1585767" z3="-0.59354231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09521808" y3="-2.24136906" z3="0.29660414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81041168" y3="-0.66021476" z3="0.49010738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.46839488" y3="-0.11798995" z3="-1.17005396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53036723" y3="0.43910027" z3="1.2533153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.22595404" y3="-0.9761268" z3="1.6744423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40393197" y3="-4.35248288" z3="-0.31346729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1261449" y3="-4.53518676" z3="0.89522948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.68627932" y3="0.29714371" z3="-1.82457632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.22626641" y3="0.67235592" z3="-1.02002785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.95550607" y3="-0.95222361" z3="-1.70346701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.58995188" y3="0.53672074" z3="0.68094106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26758791" y3="0.07066191" z3="2.26163716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97405921" y3="1.44457226" z3="1.36536526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68712945" y3="-0.01511025" z3="1.96388175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.01489106" y3="-1.60186305" z3="1.22345039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.87324631" y3="-1.47319971" z3="2.59749696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0526872" y3="-3.93825394" z3="0.88957484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51059916" y3="-4.25826246" z3="1.76548489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37385735" y3="-5.60449831" z3="0.92979704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27911844" y3="-2.20278987" z3="-0.19599417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.15082111" y3="-3.32266649" z3="-1.03047391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.5260271" y3="-4.4814564" z3="-0.5851591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02858268" y3="-4.51409397" z3="0.71181161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1680138" y3="-3.43507462" z3="1.57941345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78934513" y3="-2.2816987" z3="1.11814355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.50076247" y3="-3.27121378" z3="-2.06475703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39599682" y3="-5.33889854" z3="-1.24558426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.29549809" y3="-5.69652539" z3="1.16599879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76416462" y3="-3.49817444" z3="2.59090223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87621157" y3="-1.42041862" z3="1.78143964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49835583" y3="4.01058402" z3="0.20564799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87559451" y3="3.83535251" z3="0.16352261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.45263292" y3="3.38477938" z3="-1.01861925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.69283332" y3="3.12490942" z3="-2.15621986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31444571" y3="3.28921286" z3="-2.09145167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02412519" y3="4.32748167" z3="1.13715709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49984685" y3="4.02514429" z3="1.03771886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89779878" y3="3.14973638" z3="-1.06064391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.18276771" y3="2.78545998" z3="-3.069464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.29589544" y3="3.06026516" z3="-2.96740172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19491329" y3="-5.88050416" z3="2.35802911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.81046166" y3="-6.42053645" z3="0.31587689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.42142906" y3="3.01779769" z3="-2.14608879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.49148569" y3="3.07979129" z3="-0.00056559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53156039" y3="0.1646274" z3="-2.15280068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86143984" y3="1.410631" z3="-1.98203609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.67288447" y3="0.09595848" z3="-2.99906813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.11655906" y3="1.20493666" z3="-3.67583435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.18467446" y3="-0.86476092" z3="-3.11228592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="8.99091403" y3="1.13937023" z3="-4.32952628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.32946928" y3="2.53416151" z3="-2.71926231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.42616609" y3="2.43377535" z3="-3.54140841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80027874" y3="3.48568533" z3="-2.63422585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.76448111" y3="3.3096406" z3="-4.10223542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56772051" y3="3.88902645" z3="-0.26011896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75999831" y3="5.037078" z3="-0.01123034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93478716" y3="3.93224891" z3="0.13437835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47609634" y3="5.06536829" z3="0.69239092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55875682" y3="3.04711634" z3="-0.00252793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52885309" y3="5.07243324" z3="0.98901318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3520665" y3="6.19961469" z3="0.55531624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68228251" y3="6.21987622" z3="0.89443098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72165281" y3="7.07745279" z3="0.72869231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12634077" y3="7.11732652" z3="1.33395758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31064849" y3="-4.02729606" z3="-2.85899386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52201664" y3="-5.04416182" z3="-2.49403465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16248883" y3="-3.71275017" z3="-3.49161293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42065827" y3="-4.06696186" z3="-3.50721601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64083736" y3="-1.66897211" z3="-2.15943398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3696474" y3="-1.20511157" z3="-2.84881641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.46572835" y3="-0.98301571" z3="-1.31457789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69160825" y3="-1.74302662" z3="-2.71264371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.889,-.9595,-.7361;6.5399,-1.9479,-1.6727;6.023,-.9963,-1.515;4.7246,1.4728,-1.1127;4.2615,.3051,-.5319;2.6064,2.7389,-1.1039;3.9669,2.7299,-.8526;2.3676,4.9834,-.2796;1.7751,3.8526,-.7899;1.7519,5.8573,-.0447;2.0162,1.6204,-1.6177;3.1291,.3531,.2286;1.6847,.3812,-.5764;.6147,.7181,.3951;1.6054,-.8534,-1.446;1.1092,-2.4991,-1.2753;2.2214,-5.5549,-6.1652;1.9171,-5.1143,-5.2115;1.1251,-3.957,-2.7899;1.8866,-3.7334,-5.0717;1.578,-5.9341,-4.132;1.1974,-5.3493,-2.9311;1.4996,-3.1225,-3.8677;2.1571,-3.0712,-5.8978;1.625,-7.0226,-4.2181;.9755,-5.978,-2.0647;.6887,-3.4016,-1.5601;-.3193,-3.8886,-.8293;-.653,-4.8931,-1.1016;-.3839,-3.5832,.6167;-.4535,-3.1071,3.374;-.6978,-4.6196,1.5052;-.1248,-2.3048,1.12;-.1574,-2.0681,2.4899;-.723,-4.3839,2.8785;-.8829,-5.626,1.1223;.0917,-1.4658,.4581;.0587,-1.0588,2.8503;-.9326,-5.2091,3.5651;-.4675,-2.9255,4.4527;1.4654,-1.7869,-3.8497;1.527,-1.3683,-2.945;.2998,3.73,-.9107;-2.1004,-3.0364,-1.7316;-2.902,-3.1586,-.5935;-3.0952,-2.2414,.2966;-3.8104,-.6602,.4901;-4.4684,-.118,-1.1701;-2.5304,.4391,1.2533;-5.226,-.9761,1.6744;-3.4039,-4.3525,-.3135;-4.1261,-4.5352,.8952;-3.6863,.2971,-1.8246;-5.2263,.6724,-1.02;-4.9555,-.9522,-1.7035;-1.59,.5367,.6809;-2.2676,.0707,2.2616;-2.9741,1.4446,1.3654;-5.6871,-.0151,1.9639;-6.0149,-1.6019,1.2235;-4.8732,-1.4732,2.5975;-5.0527,-3.9383,.8896;-3.5106,-4.2583,1.7655;-4.3739,-5.6045,.9298;4.2791,-2.2028,-.196;4.1508,-3.3227,-1.0305;3.526,-4.4815,-.5852;3.0286,-4.5141,.7118;3.168,-3.4351,1.5794;3.7893,-2.2817,1.1181;4.5008,-3.2712,-2.0648;3.396,-5.3389,-1.2456;2.2955,-5.6965,1.166;2.7642,-3.4982,2.5909;3.8762,-1.4204,1.7814;-.4984,4.0106,.2056;-1.8756,3.8354,.1635;-2.4526,3.3848,-1.0186;-1.6928,3.1249,-2.1562;-.3144,3.2892,-2.0915;-.0241,4.3275,1.1372;-2.4998,4.0251,1.0377;-3.8978,3.1497,-1.0606;-2.1828,2.7855,-3.0695;.2959,3.0603,-2.9674;2.1949,-5.8805,2.358;1.8105,-6.4205,.3159;-4.4214,3.0178,-2.1461;-4.4915,3.0798,-.0006;6.5316,.1646,-2.1528;5.8614,1.4106,-1.982;7.6729,.096,-2.9991;8.1166,1.2049,-3.6758;8.1847,-.8648,-3.1123;8.9909,1.1394,-4.3295;6.3295,2.5342,-2.7193;7.4262,2.4338,-3.5414;5.8003,3.4857,-2.6342;7.7645,3.3096,-4.1022;4.5677,3.889,-.2601;3.76,5.0371,-.0112;5.9348,3.9322,.1344;6.4761,5.0654,.6924;6.5588,3.0471,-.0025;7.5289,5.0724,.989;4.3521,6.1996,.5553;5.6823,6.2199,.8944;3.7217,7.0775,.7287;6.1263,7.1173,1.334;-2.3106,-4.0273,-2.859;-2.522,-5.0442,-2.494;-3.1625,-3.7128,-3.4916;-1.4207,-4.067,-3.5072;-1.6408,-1.669,-2.1594;-2.3696,-1.2051,-2.8488;-1.4657,-.983,-1.3146;-.6916,-1.743,-2.7126;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662729061291</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003602578421 0.000420566498 0.025619991220 0.005339629058</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057023214 -0.001143831 0.000067121 0.000336873 0.000378137 0.000392600 0.000463091 0.000519764 0.000633626 0.000715812 0.000888955 0.000913529 0.001100627 0.001180595 0.001326206 0.001376251 0.001422964 0.001562479 0.002212349 0.002360295 0.002463110 0.002604612 0.002824421 0.003358684 0.003505316 0.003836798 0.004294270 0.004589614 0.004721922 0.004823973 0.005204533 0.005258540 0.006215230 0.006233558 0.006767392 0.006927763 0.007138549 0.007431681 0.008171132 0.008525589 0.008885339 0.009361815 0.009719421 0.010360603 0.011057000 0.011296642 0.011549512 0.012432385 0.013214273 0.013619880 0.013927532 0.014575634 0.014922293 0.015460867 0.015757158 0.016557448 0.017073076 0.018511146 0.018812945 0.019410193 0.020323845 0.020420117 0.021114244 0.021794022 0.022240660 0.022731985 0.023363346 0.023831279 0.024493355 0.025851631 0.026549091 0.026891515 0.027161259 0.027452635 0.028144852 0.029017898 0.030840129 0.031480262 0.032768289 0.033981203 0.034618062 0.035881512 0.039009304 0.039426564 0.041926509 0.045366165 0.045675821 0.046708489 0.048605834 0.049644961 0.049802704 0.050705234 0.051533798 0.052134211 0.052284416 0.052388818 0.052710120 0.053362572 0.054864455 0.055997501 0.056334617 0.056676833 0.056885359 0.056986245 0.057714601 0.058535598 0.059206573 0.059670195 0.060923333 0.062005836 0.062661898 0.064207702 0.064519609 0.064974731 0.065937581 0.067391202 0.067896084 0.068916144 0.070514929 0.072011642 0.072509314 0.072693395 0.072990311 0.075413017 0.078538207 0.080785000 0.081528089 0.083275969 0.084086496 0.087139501 0.088713772 0.089349382 0.089794350 0.091292253 0.093291805 0.094562325 0.095466611 0.096172253 0.096811310 0.098387520 0.100088438 0.100594003 0.102586082 0.103654355 0.104137231 0.106287379 0.108638785 0.110636647 0.112171026 0.112549625 0.113670977 0.114509201 0.116805239 0.117024712 0.118253300 0.118502904 0.120384179 0.121855171 0.124845660 0.125550780 0.128438878 0.128899600 0.130727471 0.133488423 0.136261051 0.137690676 0.138615242 0.139609672 0.140087510 0.143226264 0.144334080 0.145684462 0.146734861 0.151784209 0.153392715 0.154038136 0.160478572 0.161047152 0.168458086 0.171310271 0.175869008 0.178783070 0.181374338 0.183934780 0.188833420 0.189750274 0.191740089 0.201178752 0.202163090 0.206264778 0.206898751 0.207224797 0.212126724 0.212489252 0.213482390 0.216568259 0.217935057 0.218575329 0.220708395 0.224328907 0.225423523 0.231840186 0.234530920 0.235381028 0.238345238 0.246388742 0.249012168 0.251624188 0.256495657 0.257177437 0.258190011 0.262442066 0.271563595 0.282841540 0.291851330 0.299807210 0.299952552 0.300960508 0.307018969 0.307770937 0.309760539 0.319767166 0.321322921 0.326292756 0.330027078 0.335504872 0.347677776 0.351985048 0.355589451 0.360388067 0.361533705 0.364079021 0.384360048 0.406739476 0.413105497 0.430203769 0.432486087 0.435251121 0.450660267 0.464505171 0.474663864 0.478765951 0.480310217 0.486601812 0.498888523 0.503711039 0.514227445 0.516785401 0.543724704 0.566906670 0.567655431 0.586492424 0.591852217 0.605655407 0.644052446 0.645284617 0.667875490 0.675560560 0.687261401 0.703496337 0.704336730 0.705495794 0.708975892 0.717105043 0.733540606 0.737963177 0.739124631 0.747445656 0.750749805 0.771606230 0.775963429 0.808629899 0.821671854 0.823873916 0.828886707 0.833925686 0.847068053 0.849262168 0.851307013 0.854467825 0.863262688 0.867463096 0.875215698 0.884988288 0.887741447 0.891148165 0.893191526 0.900940255 0.910066104 0.917814192 0.920900721 0.924421596 0.931739724 0.935210779 0.955908205 0.963111942 0.965039622 0.969918160 0.976186302 0.982369369 0.998589812 1.010286561 1.014889304 1.021114788 1.040028135 1.055033695 1.069497730 1.072106022 1.079274311 1.087296580 1.103484591 1.110263112 1.111604932 1.118723784 1.122502862 1.123514416 1.141814077 1.148688365 1.161733795 1.170025022 1.176619248 1.187185089 1.200724123 1.221143242 1.231425410 1.258078503 1.296376546 1.297997649 1.314656664 1.326406612 1.326813663 1.329933198 1.331333759 1.334696276 1.342048171 1.348568641 1.365279898 1.379937863 1.381272692 1.381609544 1.427511071 1.511521227 1.557951474 1.684712062 1.920902373</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">196</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89053509" y3="-0.95837431" z3="-0.7343357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54333643" y3="-1.94745602" z3="-1.66618962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02638439" y3="-0.99571787" z3="-1.51034353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.72721769" y3="1.47364634" z3="-1.11236352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26263451" y3="0.30624643" z3="-0.53212777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.60889231" y3="2.74013907" z3="-1.10790164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.96908968" y3="2.73091158" z3="-0.85409173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3682546" y3="4.98395189" z3="-0.28181002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77678508" y3="3.85358987" z3="-0.79500072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75187505" y3="5.85741846" z3="-0.04695882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.01983125" y3="1.62155464" z3="-1.62324965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12854577" y3="0.35458689" z3="0.22588055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68571822" y3="0.38289251" z3="-0.58223354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61386727" y3="0.72092955" z3="0.38714125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.60797011" y3="-0.85232015" z3="-1.45134809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1079387" y3="-2.49713858" z3="-1.27904495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.21049833" y3="-5.55445178" z3="-6.17021061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90834381" y3="-5.11346217" z3="-5.21605862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1214731" y3="-3.9553909" z3="-2.79337554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.87699855" y3="-3.73242117" z3="-5.07699559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5727218" y3="-5.9327819" z3="-4.13514234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19460644" y3="-5.34765443" z3="-2.93369865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.49236233" y3="-3.12110319" z3="-3.87253643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.14478877" y3="-3.07065343" z3="-5.90433953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6203316" y3="-7.02125012" z3="-4.22068333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97496066" y3="-5.97593089" z3="-2.06648101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68669271" y3="-3.39941846" z3="-1.5632536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32029258" y3="-3.88689471" z3="-0.83103266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65448048" y3="-4.89126555" z3="-1.10286943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38394502" y3="-3.58047189" z3="0.61487585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45213487" y3="-3.10414487" z3="3.37231199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69922525" y3="-4.61598746" z3="1.50345876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12362764" y3="-2.30208229" z3="1.11813886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15422104" y3="-2.06628334" z3="2.48823947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72428335" y3="-4.3795806" z3="2.87663694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88076261" y3="-5.62692346" z3="1.12288244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09350765" y3="-1.46343757" z3="0.45617576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06321115" y3="-1.0569698" z3="2.84822802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93642673" y3="-5.20382513" z3="3.56198783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46531296" y3="-2.92282369" z3="4.45098486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.45572572" y3="-1.78539475" z3="-3.85447796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.52477054" y3="-1.3673192" z3="-2.95133879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30149854" y3="3.73100546" z3="-0.91832543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10236504" y3="-3.03452937" z3="-1.73140383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90289576" y3="-3.15957497" z3="-0.59249725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.09741172" y3="-2.24239984" z3="0.29859406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81538102" y3="-0.66451848" z3="0.49793247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.48476189" y3="-0.12472234" z3="-1.16075479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53111795" y3="0.43816375" z3="1.2500723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21799903" y3="-0.98160854" z3="1.69433527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40243681" y3="-4.35557481" z3="-0.31285552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12559507" y3="-4.53914244" z3="0.89527278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.70631303" y3="0.28460625" z3="-1.8243063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.23721451" y3="0.66988027" z3="-1.00749693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-4.98112606" y3="-0.96037751" z3="-1.69005302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59220815" y3="0.53647687" z3="0.67244862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.26039762" y3="0.07326291" z3="2.25513708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97298872" y3="1.44621349" z3="1.3595393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.68207237" y3="-0.01976602" z3="1.98352733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.0084759" y3="-1.61171757" z3="1.24855745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.85339955" y3="-1.47155276" z3="2.61214749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05204121" y3="-3.94199453" z3="0.88941042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51126035" y3="-4.26348184" z3="1.76652469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37325366" y3="-5.60866999" z3="0.92824962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27904516" y3="-2.20119799" z3="-0.19519136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14929493" y3="-3.32029635" z3="-1.03073837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52381087" y3="-4.4792228" z3="-0.58623284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02682659" y3="-4.51222213" z3="0.71096212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.167652" y3="-3.4338776" z3="1.57954112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78989761" y3="-2.28071481" z3="1.11912714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49931559" y3="-3.26830819" z3="-2.06500849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.39352867" y3="-5.3366821" z3="-1.24719834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.29393977" y3="-5.69512969" z3="1.16513125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76490041" y3="-3.49799307" z3="2.59138856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8789815" y3="-1.42091504" z3="1.78373137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49824091" y3="4.01127501" z3="0.19837939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87468275" y3="3.83332193" z3="0.15511923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44909043" y3="3.37914481" z3="-1.02684294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68762492" y3="3.11896053" z3="-2.16381384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.31073497" y3="3.2883719" z3="-2.09993461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02516184" y3="4.3292937" z3="1.13094489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50099019" y3="4.02468907" z3="1.02660911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89319531" y3="3.14024381" z3="-1.06908616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17605703" y3="2.77727378" z3="-3.07757522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30151317" y3="3.05828153" z3="-2.97345266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19437883" y3="-5.87943593" z3="2.35726437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.80855044" y3="-6.41955527" z3="0.31526756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41344775" y3="2.99904983" z3="-2.15328383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48927803" y3="3.07639797" z3="-0.01042511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.53664487" y3="0.1649815" z3="-2.14730694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.86629469" y3="1.41102798" z3="-1.97871885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68012482" y3="0.09611877" z3="-2.99032262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.12592996" y3="1.20504467" z3="-3.6657425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19191468" y3="-0.86466016" z3="-3.1020908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.00201036" y3="1.13938133" z3="-4.31673426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.33661827" y3="2.53441163" z3="-2.71469081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.4356308" y3="2.43397069" z3="-3.53331645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.80752851" y3="3.48593504" z3="-2.63134387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.77582547" y3="3.30988141" z3="-4.09289668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.56892246" y3="3.88983961" z3="-0.25975307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7603059" y3="5.03750874" z3="-0.0110802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93546808" y3="3.93325774" z3="0.13675865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47532721" y3="5.06621225" z3="0.69661037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56020613" y3="3.04845002" z3="-0.00020851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52763964" y3="5.07354367" z3="0.99464109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35102513" y3="6.19976064" z3="0.55748622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68054823" y3="6.2203068" z3="0.89874808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71988486" y3="7.07697535" z3="0.73028448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12358129" y3="7.1175948" z3="1.33965219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3120667" y3="-4.02374519" z3="-2.86047673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5212928" y3="-5.04166359" z3="-2.49719977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1649031" y3="-3.70912798" z3="-3.4915304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42263706" y3="-4.06080775" z3="-3.50965283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64433374" y3="-1.66611342" z3="-2.15629643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.37373079" y3="-1.20206331" z3="-2.84385123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47057588" y3="-0.98175961" z3="-1.31001994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69429933" y3="-1.73726357" z3="-2.70917486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8905,-.9584,-.7343;6.5433,-1.9475,-1.6662;6.0264,-.9957,-1.5103;4.7272,1.4736,-1.1124;4.2626,.3062,-.5321;2.6089,2.7401,-1.1079;3.9691,2.7309,-.8541;2.3683,4.984,-.2818;1.7768,3.8536,-.795;1.7519,5.8574,-.047;2.0198,1.6216,-1.6232;3.1285,.3546,.2259;1.6857,.3829,-.5822;.6139,.7209,.3871;1.608,-.8523,-1.4513;1.1079,-2.4971,-1.279;2.2105,-5.5545,-6.1702;1.9083,-5.1135,-5.2161;1.1215,-3.9554,-2.7934;1.877,-3.7324,-5.077;1.5727,-5.9328,-4.1351;1.1946,-5.3477,-2.9337;1.4924,-3.1211,-3.8725;2.1448,-3.0707,-5.9043;1.6203,-7.0213,-4.2207;.975,-5.9759,-2.0665;.6867,-3.3994,-1.5633;-.3203,-3.8869,-.831;-.6545,-4.8913,-1.1029;-.3839,-3.5805,.6149;-.4521,-3.1041,3.3723;-.6992,-4.616,1.5035;-.1236,-2.3021,1.1181;-.1542,-2.0663,2.4882;-.7243,-4.3796,2.8766;-.8808,-5.6269,1.1229;.0935,-1.4634,.4562;.0632,-1.057,2.8482;-.9364,-5.2038,3.562;-.4653,-2.9228,4.451;1.4557,-1.7854,-3.8545;1.5248,-1.3673,-2.9513;.3015,3.731,-.9183;-2.1024,-3.0345,-1.7314;-2.9029,-3.1596,-.5925;-3.0974,-2.2424,.2986;-3.8154,-.6645,.4979;-4.4848,-.1247,-1.1608;-2.5311,.4382,1.2501;-5.218,-.9816,1.6943;-3.4024,-4.3556,-.3129;-4.1256,-4.5391,.8953;-3.7063,.2846,-1.8243;-5.2372,.6699,-1.0075;-4.9811,-.9604,-1.6901;-1.5922,.5365,.6724;-2.2604,.0733,2.2551;-2.973,1.4462,1.3595;-5.6821,-.0198,1.9835;-6.0085,-1.6117,1.2486;-4.8534,-1.4716,2.6121;-5.052,-3.942,.8894;-3.5113,-4.2635,1.7665;-4.3733,-5.6087,.9282;4.279,-2.2012,-.1952;4.1493,-3.3203,-1.0307;3.5238,-4.4792,-.5862;3.0268,-4.5122,.711;3.1677,-3.4339,1.5795;3.7899,-2.2807,1.1191;4.4993,-3.2683,-2.065;3.3935,-5.3367,-1.2472;2.2939,-5.6951,1.1651;2.7649,-3.498,2.5914;3.879,-1.4209,1.7837;-.4982,4.0113,.1984;-1.8747,3.8333,.1551;-2.4491,3.3791,-1.0268;-1.6876,3.119,-2.1638;-.3107,3.2884,-2.0999;-.0252,4.3293,1.1309;-2.501,4.0247,1.0266;-3.8932,3.1402,-1.0691;-2.1761,2.7773,-3.0776;.3015,3.0583,-2.9735;2.1944,-5.8794,2.3573;1.8086,-6.4196,.3153;-4.4134,2.999,-2.1533;-4.4893,3.0764,-.0104;6.5366,.165,-2.1473;5.8663,1.411,-1.9787;7.6801,.0961,-2.9903;8.1259,1.205,-3.6657;8.1919,-.8647,-3.1021;9.002,1.1394,-4.3167;6.3366,2.5344,-2.7147;7.4356,2.434,-3.5333;5.8075,3.4859,-2.6313;7.7758,3.3099,-4.0929;4.5689,3.8898,-.2598;3.7603,5.0375,-.0111;5.9355,3.9333,.1368;6.4753,5.0662,.6966;6.5602,3.0485,-.0002;7.5276,5.0735,.9946;4.351,6.1998,.5575;5.6805,6.2203,.8987;3.7199,7.077,.7303;6.1236,7.1176,1.3397;-2.3121,-4.0237,-2.8605;-2.5213,-5.0417,-2.4972;-3.1649,-3.7091,-3.4915;-1.4226,-4.0608,-3.5097;-1.6443,-1.6661,-2.1563;-2.3737,-1.2021,-2.8439;-1.4706,-.9818,-1.31;-.6943,-1.7373,-2.7092;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662745287045</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003175687308 0.000449620109 0.023550182326 0.005338681799</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057022822 -0.001068662 0.000066845 0.000335035 0.000377072 0.000393654 0.000458987 0.000518472 0.000635961 0.000715767 0.000889036 0.000915258 0.001107365 0.001185127 0.001328067 0.001384281 0.001423643 0.001567263 0.002213017 0.002361920 0.002462856 0.002604773 0.002824038 0.003363332 0.003505646 0.003836876 0.004293714 0.004589724 0.004751472 0.004829354 0.005204904 0.005259146 0.006214815 0.006239620 0.006768556 0.006927945 0.007151430 0.007435404 0.008171974 0.008534114 0.008889095 0.009363097 0.009721664 0.010360582 0.011067950 0.011304024 0.011562527 0.012436092 0.013222912 0.013632383 0.013930951 0.014578690 0.014922216 0.015461501 0.015759149 0.016561304 0.017077385 0.018535188 0.018832995 0.019411149 0.020326091 0.020451959 0.021155567 0.021793884 0.022246766 0.022731926 0.023363965 0.023831503 0.024496702 0.025851923 0.026550960 0.026910757 0.027173788 0.027525277 0.028157354 0.029024320 0.030842999 0.031485125 0.032776095 0.034015659 0.034621562 0.035888952 0.039009898 0.039430064 0.041926496 0.045368918 0.045694973 0.046711109 0.048628042 0.049651779 0.049807649 0.050707923 0.051533881 0.052142765 0.052284443 0.052388801 0.052717020 0.053362678 0.054889055 0.055997435 0.056336049 0.056677008 0.056886064 0.056987276 0.057715341 0.058546527 0.059207811 0.059671253 0.060928597 0.062009257 0.062662603 0.064209488 0.064520273 0.064976109 0.065939002 0.067411391 0.067898881 0.068917751 0.070515852 0.072018611 0.072527057 0.072691959 0.072989766 0.075434816 0.078545641 0.080796267 0.081528114 0.083288391 0.084166638 0.087228044 0.088714898 0.089349522 0.089796143 0.091293013 0.093296588 0.094565028 0.095466613 0.096173903 0.096811780 0.098388291 0.100089175 0.100594906 0.102586093 0.103654423 0.104140069 0.106314590 0.108656444 0.110641900 0.112175780 0.112551678 0.113675176 0.114517965 0.116809645 0.117044672 0.118258977 0.118506195 0.120414416 0.121874978 0.124920807 0.125550500 0.128441303 0.128900802 0.130750674 0.133499081 0.136272183 0.137693322 0.138616004 0.139610749 0.140111813 0.143302301 0.144419387 0.145685860 0.146737429 0.151790042 0.153395389 0.154039282 0.160554945 0.161091067 0.168459041 0.171311383 0.175869571 0.178784597 0.181375024 0.183936564 0.188834526 0.189768269 0.191757504 0.201188021 0.202163251 0.206264735 0.206898857 0.207224843 0.212138587 0.212490372 0.213491606 0.216575176 0.218076273 0.219140338 0.220731894 0.224365587 0.225423638 0.231841468 0.234530934 0.235382045 0.238356071 0.246390595 0.249016439 0.251625040 0.256496433 0.257177525 0.258208177 0.262443220 0.271563599 0.282843853 0.291858913 0.299810785 0.299963646 0.300960583 0.307021813 0.307771062 0.309760694 0.319778896 0.321324072 0.326301356 0.330033401 0.335522489 0.347678633 0.351985901 0.355590405 0.360388639 0.361564958 0.364079035 0.384362677 0.406743619 0.413365023 0.430203927 0.432538947 0.435261214 0.450715600 0.464533843 0.474702905 0.478772003 0.480311815 0.486603589 0.498890115 0.503713816 0.514274473 0.516791480 0.543733642 0.566906679 0.567655817 0.586505902 0.591866461 0.605656479 0.644094875 0.645290733 0.667905889 0.675561554 0.687301618 0.703517958 0.704337043 0.705584816 0.709055788 0.717105211 0.733669130 0.737963443 0.739124910 0.747483567 0.750749813 0.771606320 0.775963517 0.808632659 0.821673229 0.823876722 0.828892142 0.833930151 0.847076080 0.849263738 0.851342823 0.854467858 0.863263994 0.867463182 0.875243387 0.885258712 0.887819990 0.891148450 0.893196990 0.900941667 0.910073762 0.917878999 0.921660903 0.924428456 0.931744635 0.935284445 0.955959627 0.963252469 0.965048046 0.969940335 0.976216649 0.982369453 0.998590560 1.010802159 1.014899445 1.021125057 1.040028265 1.055034805 1.069537869 1.072192544 1.079278638 1.087298107 1.103484636 1.110263112 1.111606059 1.118737353 1.122503101 1.123514441 1.141818146 1.148708632 1.161736114 1.170027700 1.176627217 1.187189888 1.200725076 1.221155594 1.231429078 1.258089348 1.296376722 1.298048899 1.314656722 1.326413003 1.326832846 1.329945876 1.331333968 1.334702073 1.342071934 1.348579520 1.365298975 1.379941475 1.381272894 1.381610214 1.427514054 1.512017978 1.557953546 1.684712197 1.921084129</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">197</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89237603" y3="-0.95794774" z3="-0.73167356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54686872" y3="-1.94771" z3="-1.66003416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.02990148" y3="-0.99573433" z3="-1.50525649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73037374" y3="1.47418618" z3="-1.11001542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26438672" y3="0.30684677" z3="-0.53066704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61220886" y3="2.74031933" z3="-1.11002833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9718021" y3="2.7315633" z3="-0.85382589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3701492" y3="4.98480916" z3="-0.28799325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.77942458" y3="3.8536215" z3="-0.79936116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7535319" y3="5.85836633" z3="-0.05582007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02410917" y3="1.6216523" z3="-1.62615026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12878617" y3="0.35509268" z3="0.22507178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68782039" y3="0.38271902" z3="-0.58599841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61377986" y3="0.72006261" z3="0.38118585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61221265" y3="-0.85226477" z3="-1.45566722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.1078682" y3="-2.49573037" z3="-1.28157755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.20049053" y3="-5.55130886" z3="-6.17603015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.90019799" y3="-5.11052389" z3="-5.22117124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1181512" y3="-3.95297744" z3="-2.79657341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.86799372" y3="-3.72952791" z3="-5.08213585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56794039" y3="-5.9300552" z3="-4.13937385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19218145" y3="-5.34518002" z3="-2.93702356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.48587952" y3="-3.11851982" z3="-3.87670434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.13320612" y3="-3.06757284" z3="-5.91015499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61628205" y3="-7.01847834" z3="-4.22502861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97487175" y3="-5.97358647" z3="-2.06928632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68521076" y3="-3.39736575" z3="-1.56554099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32107318" y3="-3.88447472" z3="-0.83228365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65527839" y3="-4.88898764" z3="-1.10382104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38301716" y3="-3.57850187" z3="0.61368532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45119754" y3="-3.10102653" z3="3.37068496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69865139" y3="-4.61402334" z3="1.50262826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12141014" y3="-2.30017375" z3="1.11641558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15295849" y3="-2.06308164" z3="2.48623444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7235349" y3="-4.37746848" z3="2.87575779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88531943" y3="-5.62052997" z3="1.12026978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09609392" y3="-1.46149584" z3="0.45435959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0655309" y3="-1.05418856" z3="2.84627085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93525235" y3="-5.20175668" z3="3.56262066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4644349" y3="-2.91918778" z3="4.44931052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.44836673" y3="-1.782849" z3="-3.85897786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51971772" y3="-1.36461471" z3="-2.95504446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30447636" y3="3.72926287" z3="-0.9231928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10394581" y3="-3.03211207" z3="-1.72905644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90444566" y3="-3.16100851" z3="-0.59082053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10031153" y3="-2.24818324" z3="0.30351444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81571084" y3="-0.66733408" z3="0.50229431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.49922663" y3="-0.13351435" z3="-1.15087569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52904206" y3="0.43956201" z3="1.24360669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21155528" y3="-0.98595141" z3="1.70913696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40315784" y3="-4.35737665" z3="-0.31596814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12658268" y3="-4.54662488" z3="0.89057164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.72680188" y3="0.2680733" z3="-1.82488912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.24719534" y3="0.66514771" z3="-0.99315753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.00401858" y3="-0.96898937" z3="-1.66650284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59547454" y3="0.53731869" z3="0.66080695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.25340371" y3="0.07802734" z3="2.25065546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97465686" y3="1.44430685" z3="1.35468623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.67481338" y3="-0.02837769" z3="2.00460278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.00353561" y3="-1.61888431" z3="1.27051105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.84104802" y3="-1.47772005" z3="2.62864551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05389678" y3="-3.95064537" z3="0.88661787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5128182" y3="-4.27354792" z3="1.76291372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37308172" y3="-5.61616505" z3="0.91917165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27946434" y3="-2.20059927" z3="-0.19360833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14789356" y3="-3.31848106" z3="-1.03032004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.52123554" y3="-4.47703675" z3="-0.58669215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02548867" y3="-4.51136218" z3="0.71091215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16765072" y3="-3.43401526" z3="1.58043226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79049062" y3="-2.28073081" z3="1.12069287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4970762" y3="-3.26531215" z3="-2.06477419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38866886" y3="-5.33268844" z3="-1.24875024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.29202767" y3="-5.69396623" z3="1.16422956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76498295" y3="-3.49839304" z3="2.59233724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87988766" y3="-1.42089804" z3="1.78586448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49637488" y3="4.0117994" z3="0.19081024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87285064" y3="3.83216086" z3="0.1472709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44649834" y3="3.37511249" z3="-1.03433984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6841159" y3="3.11380505" z3="-2.17000402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30651629" y3="3.28313039" z3="-2.10372998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02464326" y3="4.33276207" z3="1.12247881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49915588" y3="4.02306866" z3="1.02005297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.89085053" y3="3.13500916" z3="-1.07776449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.17147028" y3="2.7692532" z3="-3.08285954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30620678" y3="3.05252584" z3="-2.97710611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1936676" y3="-5.87998798" z3="2.35614364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.80492952" y3="-6.41626161" z3="0.31375492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.41148498" y3="2.98959003" z3="-2.16341629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48725067" y3="3.07562153" z3="-0.01830273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54194669" y3="0.16485119" z3="-2.14092098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87129556" y3="1.41111047" z3="-1.97411703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.68770783" y3="0.0955852" z3="-2.98089696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.13535502" y3="1.20419185" z3="-3.65563599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.19985873" y3="-0.86524867" z3="-3.09070925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.01336147" y3="1.1382763" z3="-4.3041333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34329869" y3="2.53402969" z3="-2.70980992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.44440915" y3="2.43307173" z3="-3.52587555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.81380383" y3="3.4855778" z3="-2.62857875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.78592233" y3="3.3085609" z3="-4.08537071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57030502" y3="3.89116679" z3="-0.25972505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76154513" y3="5.03899833" z3="-0.01485164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9355837" y3="3.93512719" z3="0.14014047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47419747" y3="5.06864443" z3="0.69997404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56024229" y3="3.05028243" z3="0.0060791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.5254312" y3="5.07634857" z3="1.00093974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35119979" y3="6.2019171" z3="0.55321533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67959324" y3="6.22285622" z3="0.8979865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72009548" y3="7.07941225" z3="0.72310826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12157597" y3="7.12058482" z3="1.33897957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31342412" y3="-4.01840022" z3="-2.8605581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52022813" y3="-5.03766905" z3="-2.49952607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.16776166" y3="-3.70392754" z3="-3.48967727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42476508" y3="-4.05217172" z3="-3.51097202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.64763157" y3="-1.66207006" z3="-2.15134555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3769769" y3="-1.19762566" z3="-2.83963694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.47555333" y3="-0.97900091" z3="-1.30384186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.69752362" y3="-1.73157749" z3="-2.70413985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8924,-.9579,-.7317;6.5469,-1.9477,-1.66;6.0299,-.9957,-1.5053;4.7304,1.4742,-1.11;4.2644,.3068,-.5307;2.6122,2.7403,-1.11;3.9718,2.7316,-.8538;2.3701,4.9848,-.288;1.7794,3.8536,-.7994;1.7535,5.8584,-.0558;2.0241,1.6217,-1.6262;3.1288,.3551,.2251;1.6878,.3827,-.586;.6138,.7201,.3812;1.6122,-.8523,-1.4557;1.1079,-2.4957,-1.2816;2.2005,-5.5513,-6.176;1.9002,-5.1105,-5.2212;1.1182,-3.953,-2.7966;1.868,-3.7295,-5.0821;1.5679,-5.9301,-4.1394;1.1922,-5.3452,-2.937;1.4859,-3.1185,-3.8767;2.1332,-3.0676,-5.9102;1.6163,-7.0185,-4.225;.9749,-5.9736,-2.0693;.6852,-3.3974,-1.5655;-.3211,-3.8845,-.8323;-.6553,-4.889,-1.1038;-.383,-3.5785,.6137;-.4512,-3.101,3.3707;-.6987,-4.614,1.5026;-.1214,-2.3002,1.1164;-.153,-2.0631,2.4862;-.7235,-4.3775,2.8758;-.8853,-5.6205,1.1203;.0961,-1.4615,.4544;.0655,-1.0542,2.8463;-.9353,-5.2018,3.5626;-.4644,-2.9192,4.4493;1.4484,-1.7828,-3.859;1.5197,-1.3646,-2.955;.3045,3.7293,-.9232;-2.1039,-3.0321,-1.7291;-2.9044,-3.161,-.5908;-3.1003,-2.2482,.3035;-3.8157,-.6673,.5023;-4.4992,-.1335,-1.1509;-2.529,.4396,1.2436;-5.2116,-.986,1.7091;-3.4032,-4.3574,-.316;-4.1266,-4.5466,.8906;-3.7268,.2681,-1.8249;-5.2472,.6651,-.9932;-5.004,-.969,-1.6665;-1.5955,.5373,.6608;-2.2534,.078,2.2507;-2.9747,1.4443,1.3547;-5.6748,-.0284,2.0046;-6.0035,-1.6189,1.2705;-4.841,-1.4777,2.6286;-5.0539,-3.9506,.8866;-3.5128,-4.2735,1.7629;-4.3731,-5.6162,.9192;4.2795,-2.2006,-.1936;4.1479,-3.3185,-1.0303;3.5212,-4.477,-.5867;3.0255,-4.5114,.7109;3.1677,-3.434,1.5804;3.7905,-2.2807,1.1207;4.4971,-3.2653,-2.0648;3.3887,-5.3327,-1.2488;2.292,-5.694,1.1642;2.765,-3.4984,2.5923;3.8799,-1.4209,1.7859;-.4964,4.0118,.1908;-1.8729,3.8322,.1473;-2.4465,3.3751,-1.0343;-1.6841,3.1138,-2.17;-.3065,3.2831,-2.1037;-.0246,4.3328,1.1225;-2.4992,4.0231,1.0201;-3.8909,3.135,-1.0778;-2.1715,2.7693,-3.0829;.3062,3.0525,-2.9771;2.1937,-5.88,2.3561;1.8049,-6.4163,.3138;-4.4115,2.9896,-2.1634;-4.4873,3.0756,-.0183;6.5419,.1649,-2.1409;5.8713,1.4111,-1.9741;7.6877,.0956,-2.9809;8.1354,1.2042,-3.6556;8.1999,-.8652,-3.0907;9.0134,1.1383,-4.3041;6.3433,2.534,-2.7098;7.4444,2.4331,-3.5259;5.8138,3.4856,-2.6286;7.7859,3.3086,-4.0854;4.5703,3.8912,-.2597;3.7615,5.039,-.0149;5.9356,3.9351,.1401;6.4742,5.0686,.7;6.5602,3.0503,.0061;7.5254,5.0763,1.0009;4.3512,6.2019,.5532;5.6796,6.2229,.898;3.7201,7.0794,.7231;6.1216,7.1206,1.339;-2.3134,-4.0184,-2.8606;-2.5202,-5.0377,-2.4995;-3.1678,-3.7039,-3.4897;-1.4248,-4.0522,-3.511;-1.6476,-1.6621,-2.1513;-2.377,-1.1976,-2.8396;-1.4756,-.979,-1.3038;-.6975,-1.7316,-2.7041;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662763244487</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003044519202 0.000427797896 0.028316824319 0.005336311977</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057024504 -0.001046082 0.000065996 0.000332809 0.000378279 0.000394017 0.000463193 0.000518130 0.000635577 0.000716646 0.000888877 0.000916842 0.001113711 0.001186785 0.001329705 0.001386581 0.001425042 0.001568136 0.002214193 0.002361906 0.002463688 0.002604675 0.002824620 0.003364381 0.003510409 0.003836824 0.004296575 0.004591676 0.004763405 0.004849749 0.005206185 0.005261156 0.006220045 0.006239752 0.006770476 0.006933068 0.007164567 0.007435305 0.008172035 0.008550163 0.008889485 0.009363149 0.009722335 0.010361658 0.011073444 0.011307475 0.011587828 0.012439553 0.013235233 0.013640192 0.013936148 0.014581297 0.014922446 0.015462196 0.015760568 0.016564931 0.017081991 0.018547525 0.018838257 0.019411202 0.020325848 0.020490990 0.021197644 0.021797449 0.022255502 0.022734530 0.023368249 0.023835889 0.024499507 0.025852166 0.026551375 0.026915974 0.027175467 0.027560982 0.028168250 0.029038229 0.030844456 0.031486037 0.032801226 0.034043112 0.034622302 0.035895126 0.039011155 0.039437033 0.041926575 0.045370438 0.045748915 0.046731898 0.048649695 0.049654577 0.049812146 0.050710076 0.051533898 0.052147966 0.052284442 0.052389115 0.052722794 0.053362735 0.054903112 0.055998102 0.056341500 0.056678232 0.056894210 0.056987563 0.057715436 0.058552897 0.059209029 0.059671771 0.060933527 0.062010860 0.062670354 0.064209274 0.064521555 0.064977644 0.065941329 0.067420432 0.067902685 0.068918809 0.070516172 0.072030220 0.072557416 0.072698891 0.072990958 0.075465264 0.078549673 0.080802803 0.081528343 0.083297797 0.084291964 0.087400005 0.088721597 0.089349724 0.089796294 0.091295303 0.093301476 0.094568222 0.095467872 0.096176934 0.096814055 0.098390821 0.100089382 0.100595164 0.102587084 0.103656067 0.104140261 0.106327875 0.108673731 0.110643293 0.112177211 0.112576504 0.113680641 0.114517325 0.116824054 0.117067417 0.118323576 0.118508729 0.120449761 0.121881647 0.124994361 0.125551829 0.128443026 0.128909652 0.130778549 0.133511602 0.136277861 0.137695851 0.138620564 0.139610922 0.140148935 0.143360105 0.144475697 0.145687562 0.146738830 0.151796517 0.153404095 0.154042310 0.160571903 0.161151068 0.168459762 0.171314039 0.175871403 0.178784731 0.181377359 0.183948131 0.188834656 0.189779769 0.191767353 0.201190923 0.202163682 0.206264931 0.206899837 0.207225183 0.212143670 0.212495405 0.213497339 0.216581044 0.218104335 0.219622567 0.220747853 0.224409345 0.225423807 0.231843014 0.234531015 0.235383151 0.238372916 0.246399505 0.249024955 0.251625461 0.256499685 0.257177542 0.258224928 0.262443892 0.271563601 0.282844862 0.291875953 0.299818182 0.299968835 0.300962715 0.307024318 0.307771115 0.309762146 0.319782565 0.321324988 0.326308050 0.330042413 0.335535269 0.347680057 0.351985946 0.355591391 0.360390469 0.361585119 0.364079235 0.384363072 0.406753303 0.413648560 0.430204291 0.432547360 0.435262827 0.450752275 0.464560557 0.474778111 0.478784157 0.480312284 0.486603850 0.498891093 0.503723385 0.514305986 0.516796019 0.543744836 0.566906675 0.567656895 0.586518905 0.591883088 0.605656729 0.644121047 0.645295465 0.667929894 0.675562106 0.687332410 0.703531786 0.704338086 0.705629431 0.709144742 0.717105313 0.733759661 0.737963938 0.739127604 0.747587813 0.750749944 0.771606319 0.775963518 0.808634576 0.821673980 0.823877090 0.828898795 0.833935932 0.847087269 0.849268102 0.851357494 0.854471614 0.863264006 0.867463998 0.875269490 0.885724234 0.887957803 0.891159338 0.893203546 0.900951672 0.910083058 0.917882978 0.922380672 0.924436527 0.931749816 0.935356426 0.955993858 0.963355068 0.965055784 0.969959257 0.976221444 0.982370289 0.998590574 1.011293653 1.014905789 1.021136856 1.040028418 1.055034959 1.069561277 1.072289092 1.079293289 1.087301809 1.103484703 1.110263203 1.111608292 1.118746783 1.122504039 1.123515394 1.141819666 1.148717036 1.161737310 1.170030073 1.176632834 1.187192820 1.200728873 1.221167791 1.231448849 1.258092339 1.296378784 1.298062040 1.314658764 1.326414809 1.326834958 1.329955229 1.331334003 1.334702675 1.342077478 1.348592823 1.365318064 1.379942444 1.381272943 1.381616036 1.427522048 1.512519458 1.557953591 1.684713131 1.921251010</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">198</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8937552" y3="-0.95735261" z3="-0.72692861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.54997376" y3="-1.94835483" z3="-1.65072242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03308103" y3="-0.99606709" z3="-1.4977257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73287076" y3="1.47435865" z3="-1.10797107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26551522" y3="0.3076431" z3="-0.5284036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61472312" y3="2.74093685" z3="-1.11351667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9738925" y3="2.73212529" z3="-0.85481708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37116929" y3="4.98641572" z3="-0.29222823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78146796" y3="3.8547959" z3="-0.80475576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75401445" y3="5.8603602" z3="-0.06037227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.02754044" y3="1.62186285" z3="-1.62969188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1283045" y3="0.35656092" z3="0.22486802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.68903332" y3="0.38390127" z3="-0.58934341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61275553" y3="0.72211856" z3="0.37489562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6156449" y3="-0.8518307" z3="-1.45802158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10651227" y3="-2.49277438" z3="-1.28398482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.19246065" y3="-5.54592878" z3="-6.18144302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.89373557" y3="-5.10564738" z3="-5.22585662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.11536264" y3="-3.94946837" z3="-2.79950997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.85998426" y3="-3.72462649" z3="-5.08659749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56503238" y3="-5.92577158" z3="-4.14343781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.19100282" y3="-5.34157561" z3="-2.94016037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47964699" y3="-3.11432349" z3="-3.88028756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.12247688" y3="-3.06223205" z3="-5.91513595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.6147052" y3="-7.01415197" z3="-4.22936892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97605486" y3="-5.97028497" z3="-2.07201446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68350799" y3="-3.39445554" z3="-1.56783652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32249235" y3="-3.88179843" z3="-0.83434654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65660562" y3="-4.88644846" z3="-1.10554576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38407092" y3="-3.57547595" z3="0.61170915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4502735" y3="-3.09899256" z3="3.36929726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.700585" y3="-4.61037974" z3="1.50071093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12120576" y3="-2.29774585" z3="1.11469204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15119203" y3="-2.06155692" z3="2.48477585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7244144" y3="-4.37418993" z3="2.87396667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88483054" y3="-5.62018559" z3="1.11996723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09674584" y3="-1.45926451" z3="0.45259052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06794678" y3="-1.05251529" z3="2.8445883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93724341" y3="-5.19825374" z3="3.55974274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46298324" y3="-2.91731157" z3="4.44795916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.4397075" y3="-1.77863706" z3="-3.86166253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51672377" y3="-1.36158045" z3="-2.95835849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30656396" y3="3.73024022" z3="-0.93011714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10579773" y3="-3.02986685" z3="-1.73022837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90593847" y3="-3.16286565" z3="-0.5920326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10247495" y3="-2.25198395" z3="0.3044383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.81998217" y3="-0.67479823" z3="0.5095175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.51517754" y3="-0.14332819" z3="-1.14010991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53149157" y3="0.43702256" z3="1.24161786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.20295228" y3="-0.99412448" z3="1.72790484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40242658" y3="-4.36148305" z3="-0.31903373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12653944" y3="-4.55361283" z3="0.88723408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.74651541" y3="0.25450106" z3="-1.82224798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.25635343" y3="0.66003135" z3="-0.97873089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.02987105" y3="-0.97833389" z3="-1.65200869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.59794802" y3="0.53604465" z3="0.65489609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.24924836" y3="0.07927307" z3="2.24647515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97604667" y3="1.44377566" z3="1.35049057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66547092" y3="-0.03259486" z3="2.02161888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.9980638" y3="-1.62797151" z3="1.29882788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.82134562" y3="-1.48164574" z3="2.6401426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05416534" y3="-3.95829576" z3="0.8836551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51354092" y3="-4.28135856" z3="1.76074259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37220836" y3="-5.62389794" z3="0.91387733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27896614" y3="-2.19958161" z3="-0.19016663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14662778" y3="-3.31643625" z3="-1.02819604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51857959" y3="-4.47473596" z3="-0.58615272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.02238476" y3="-4.5097146" z3="0.71128915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16535057" y3="-3.43359597" z3="1.58208806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78944875" y3="-2.28056115" z3="1.12383072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49677746" y3="-3.26280719" z3="-2.06234323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.38636437" y3="-5.33057717" z3="-1.24888321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.28856376" y3="-5.69266604" z3="1.16331462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.76273995" y3="-3.49909979" z3="2.59390002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88019661" y3="-1.42219368" z3="1.79014692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49506534" y3="4.01298556" z3="0.18437206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87122527" y3="3.83158813" z3="0.14018049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.44340555" y3="3.37082872" z3="-1.04026768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.68013558" y3="3.10850275" z3="-2.17534558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.30351439" y3="3.28168865" z3="-2.11049765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02379896" y3="4.33598586" z3="1.11586188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49878043" y3="4.02450762" z3="1.01034363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88695379" y3="3.12719895" z3="-1.08295443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16673155" y3="2.76155594" z3="-3.08796442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.30996909" y3="3.04997235" z3="-2.98302778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.19095808" y3="-5.88040634" z3="2.35497095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.80062396" y3="-6.41376243" z3="0.31220679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.40449143" y3="2.97180566" z3="-2.16624618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.485216" y3="3.0741314" z3="-0.02511639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.54687215" y3="0.16389841" z3="-2.13318489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.87588279" y3="1.41029598" z3="-1.96920099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.69458975" y3="0.09367242" z3="-2.97054833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.14392416" y3="1.20156596" z3="-3.64535916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2068718" y3="-0.86737089" z3="-3.07841954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.02333895" y3="1.13486289" z3="-4.29204445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.34982329" y3="2.53250191" z3="-2.70472092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.45284627" y3="2.43072417" z3="-3.51804798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82041464" y3="3.48432162" z3="-2.62521201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.7957199" y3="3.30576367" z3="-4.07739499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57165947" y3="3.89236219" z3="-0.26096082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7623423" y3="5.04080193" z3="-0.01753014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93703598" y3="3.93652602" z3="0.13982336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47566778" y3="5.0709012" z3="0.69791214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56199204" y3="3.0512085" z3="0.00716765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52737874" y3="5.07868461" z3="0.99885044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35146886" y3="6.2045067" z3="0.54990541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6803927" y3="6.2257241" z3="0.89464892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7198959" y3="7.08247945" z3="0.71905882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.1223597" y3="7.1241692" z3="1.33429542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31404888" y3="-4.01403319" z3="-2.86394057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5177883" y3="-5.03475736" z3="-2.50564536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17006728" y3="-3.69999764" z3="-3.49100292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42613642" y3="-4.04345525" z3="-3.51542688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65187427" y3="-1.65802114" z3="-2.14915756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38177919" y3="-1.19378024" z3="-2.83628278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48163266" y3="-0.97587876" z3="-1.3002565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7011764" y3="-1.72424786" z3="-2.70135587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8938,-.9574,-.7269;6.55,-1.9484,-1.6507;6.0331,-.9961,-1.4977;4.7329,1.4744,-1.108;4.2655,.3076,-.5284;2.6147,2.7409,-1.1135;3.9739,2.7321,-.8548;2.3712,4.9864,-.2922;1.7815,3.8548,-.8048;1.754,5.8604,-.0604;2.0275,1.6219,-1.6297;3.1283,.3566,.2249;1.689,.3839,-.5893;.6128,.7221,.3749;1.6156,-.8518,-1.458;1.1065,-2.4928,-1.284;2.1925,-5.5459,-6.1814;1.8937,-5.1056,-5.2259;1.1154,-3.9495,-2.7995;1.86,-3.7246,-5.0866;1.565,-5.9258,-4.1434;1.191,-5.3416,-2.9402;1.4796,-3.1143,-3.8803;2.1225,-3.0622,-5.9151;1.6147,-7.0142,-4.2294;.9761,-5.9703,-2.072;.6835,-3.3945,-1.5678;-.3225,-3.8818,-.8343;-.6566,-4.8864,-1.1055;-.3841,-3.5755,.6117;-.4503,-3.099,3.3693;-.7006,-4.6104,1.5007;-.1212,-2.2977,1.1147;-.1512,-2.0616,2.4848;-.7244,-4.3742,2.874;-.8848,-5.6202,1.12;.0967,-1.4593,.4526;.0679,-1.0525,2.8446;-.9372,-5.1983,3.5597;-.463,-2.9173,4.448;1.4397,-1.7786,-3.8617;1.5167,-1.3616,-2.9584;.3066,3.7302,-.9301;-2.1058,-3.0299,-1.7302;-2.9059,-3.1629,-.592;-3.1025,-2.252,.3044;-3.82,-.6748,.5095;-4.5152,-.1433,-1.1401;-2.5315,.437,1.2416;-5.203,-.9941,1.7279;-3.4024,-4.3615,-.319;-4.1265,-4.5536,.8872;-3.7465,.2545,-1.8222;-5.2564,.66,-.9787;-5.0299,-.9783,-1.652;-1.5979,.536,.6549;-2.2492,.0793,2.2465;-2.976,1.4438,1.3505;-5.6655,-.0326,2.0216;-5.9981,-1.628,1.2988;-4.8213,-1.4816,2.6401;-5.0542,-3.9583,.8837;-3.5135,-4.2814,1.7607;-4.3722,-5.6239,.9139;4.279,-2.1996,-.1902;4.1466,-3.3164,-1.0282;3.5186,-4.4747,-.5862;3.0224,-4.5097,.7113;3.1654,-3.4336,1.5821;3.7894,-2.2806,1.1238;4.4968,-3.2628,-2.0623;3.3864,-5.3306,-1.2489;2.2886,-5.6927,1.1633;2.7627,-3.4991,2.5939;3.8802,-1.4222,1.7901;-.4951,4.013,.1844;-1.8712,3.8316,.1402;-2.4434,3.3708,-1.0403;-1.6801,3.1085,-2.1753;-.3035,3.2817,-2.1105;-.0238,4.336,1.1159;-2.4988,4.0245,1.0103;-3.887,3.1272,-1.083;-2.1667,2.7616,-3.088;.31,3.05,-2.983;2.191,-5.8804,2.355;1.8006,-6.4138,.3122;-4.4045,2.9718,-2.1662;-4.4852,3.0741,-.0251;6.5469,.1639,-2.1332;5.8759,1.4103,-1.9692;7.6946,.0937,-2.9705;8.1439,1.2016,-3.6454;8.2069,-.8674,-3.0784;9.0233,1.1349,-4.292;6.3498,2.5325,-2.7047;7.4528,2.4307,-3.518;5.8204,3.4843,-2.6252;7.7957,3.3058,-4.0774;4.5717,3.8924,-.261;3.7623,5.0408,-.0175;5.937,3.9365,.1398;6.4757,5.0709,.6979;6.562,3.0512,.0072;7.5274,5.0787,.9989;4.3515,6.2045,.5499;5.6804,6.2257,.8946;3.7199,7.0825,.7191;6.1224,7.1242,1.3343;-2.314,-4.014,-2.8639;-2.5178,-5.0348,-2.5056;-3.1701,-3.7,-3.491;-1.4261,-4.0435,-3.5154;-1.6519,-1.658,-2.1492;-2.3818,-1.1938,-2.8363;-1.4816,-.9759,-1.3003;-.7012,-1.7242,-2.7014;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662780570105</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003608478736 0.000438879138 0.023398876407 0.005339051205</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057029634 -0.000981573 0.000064845 0.000331934 0.000377947 0.000394585 0.000463221 0.000517935 0.000635410 0.000716218 0.000889175 0.000919439 0.001115592 0.001186814 0.001331059 0.001387718 0.001426888 0.001568903 0.002214082 0.002361771 0.002463140 0.002604838 0.002827287 0.003380992 0.003514574 0.003837457 0.004304314 0.004593028 0.004774330 0.004868174 0.005207316 0.005262884 0.006229041 0.006239872 0.006772486 0.006937295 0.007166192 0.007440248 0.008172082 0.008563997 0.008889496 0.009363920 0.009722317 0.010362022 0.011072825 0.011312667 0.011607595 0.012443079 0.013246894 0.013641871 0.013945616 0.014582436 0.014922850 0.015463759 0.015761236 0.016569001 0.017088007 0.018552864 0.018837815 0.019411272 0.020326279 0.020514906 0.021219673 0.021806007 0.022262479 0.022738491 0.023375900 0.023844345 0.024501136 0.025852565 0.026551492 0.026917840 0.027175567 0.027579731 0.028173389 0.029052186 0.030845273 0.031486168 0.032851485 0.034059757 0.034622260 0.035899095 0.039011978 0.039443670 0.041926838 0.045372276 0.045835620 0.046763926 0.048664509 0.049655974 0.049815989 0.050711939 0.051533913 0.052150390 0.052284473 0.052389792 0.052726546 0.053362956 0.054910401 0.055999668 0.056349824 0.056682672 0.056926392 0.056988277 0.057715781 0.058554767 0.059212214 0.059672129 0.060934140 0.062010875 0.062689267 0.064210365 0.064523122 0.064978532 0.065946282 0.067422266 0.067907751 0.068919117 0.070516176 0.072038770 0.072582967 0.072747277 0.073005163 0.075483435 0.078551601 0.080805574 0.081529738 0.083304078 0.084421269 0.087591164 0.088731437 0.089350050 0.089796321 0.091297140 0.093304132 0.094570745 0.095469954 0.096178724 0.096816377 0.098393408 0.100090124 0.100595354 0.102590951 0.103662645 0.104140403 0.106329986 0.108686961 0.110644089 0.112177126 0.112621548 0.113685802 0.114527528 0.116839488 0.117088556 0.118462725 0.118511757 0.120479919 0.121882855 0.125024829 0.125559448 0.128445072 0.128923245 0.130798501 0.133519064 0.136280142 0.137698737 0.138621240 0.139610946 0.140197925 0.143387918 0.144505658 0.145688063 0.146739510 0.151802455 0.153412277 0.154047895 0.160571807 0.161188033 0.168460533 0.171316285 0.175872685 0.178784843 0.181378886 0.183954859 0.188834837 0.189786346 0.191777719 0.201191839 0.202163717 0.206266807 0.206900703 0.207226669 0.212148082 0.212504517 0.213497502 0.216581572 0.218120981 0.219994939 0.220773394 0.224428705 0.225424129 0.231843997 0.234531323 0.235383228 0.238384162 0.246405474 0.249029812 0.251625699 0.256503552 0.257177734 0.258235145 0.262443998 0.271563621 0.282845114 0.291890886 0.299829215 0.299969884 0.300967908 0.307024936 0.307771118 0.309764976 0.319782695 0.321325394 0.326310408 0.330050985 0.335538706 0.347682568 0.351986397 0.355591425 0.360392633 0.361590714 0.364080033 0.384363458 0.406763828 0.413890207 0.430204745 0.432558923 0.435268198 0.450770936 0.464580839 0.474891198 0.478795654 0.480312498 0.486604087 0.498891693 0.503733050 0.514328877 0.516796328 0.543756071 0.566906968 0.567658500 0.586528803 0.591927239 0.605657524 0.644132785 0.645302182 0.667944495 0.675563741 0.687347057 0.703547035 0.704339272 0.705679994 0.709196253 0.717106649 0.733821647 0.737964246 0.739146298 0.747637213 0.750750556 0.771606386 0.775963720 0.808636617 0.821674656 0.823877117 0.828901382 0.833943975 0.847093692 0.849268737 0.851362086 0.854475789 0.863264076 0.867465447 0.875298016 0.886330762 0.888245972 0.891183448 0.893212134 0.900963981 0.910089116 0.917898710 0.922828923 0.924445698 0.931754549 0.935413297 0.956003086 0.963410018 0.965062340 0.969964495 0.976232826 0.982372736 0.998591323 1.011692713 1.014907844 1.021142953 1.040028424 1.055034998 1.069571145 1.072343025 1.079315932 1.087304843 1.103484907 1.110263518 1.111611294 1.118748336 1.122504667 1.123516512 1.141822392 1.148718645 1.161737467 1.170031236 1.176633780 1.187194589 1.200732674 1.221179567 1.231476282 1.258092916 1.296379440 1.298064796 1.314660698 1.326416154 1.326839624 1.329956627 1.331335961 1.334703310 1.342077862 1.348594147 1.365319402 1.379942828 1.381274859 1.381639096 1.427536203 1.513313886 1.557953828 1.684713869 1.921542683</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">199</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89480795" y3="-0.95689556" z3="-0.72349592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55294326" y3="-1.94904635" z3="-1.64240969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0360133" y3="-0.99647527" z3="-1.4914092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73570952" y3="1.47465795" z3="-1.10599453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26674444" y3="0.30842184" z3="-0.52666813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.61788041" y3="2.74168518" z3="-1.11560584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97676697" y3="2.7329569" z3="-0.85508722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37350499" y3="4.9880966" z3="-0.29912875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78406465" y3="3.85566281" z3="-0.80943873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75626085" y3="5.8621686" z3="-0.07065729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03136985" y3="1.62236481" z3="-1.63206302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12835812" y3="0.3579139" z3="0.22481805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69016596" y3="0.38540209" z3="-0.59147472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61278096" y3="0.72496728" z3="0.37128235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.61723608" y3="-0.8506765" z3="-1.4599999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10569988" y3="-2.49111104" z3="-1.28632251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.18410485" y3="-5.54031736" z3="-6.18789889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8869893" y3="-5.10071848" z3="-5.23149178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.1125459" y3="-3.94635378" z3="-2.80303651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.85244943" y3="-3.71982495" z3="-5.09152958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.56118176" y3="-5.92157452" z3="-4.14877939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18906489" y3="-5.33828293" z3="-2.94445152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.47410895" y3="-3.11045879" z3="-3.88414284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.11267204" y3="-3.05685884" z3="-5.92032217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.61151139" y3="-7.00982606" z3="-4.23538228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97603992" y3="-5.96755884" z3="-2.07624628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68190963" y3="-3.39216951" z3="-1.57058057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32361442" y3="-3.8799781" z3="-0.83635586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65776495" y3="-4.88451833" z3="-1.10781533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38364882" y3="-3.57442771" z3="0.60986817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.45099661" y3="-3.09635734" z3="3.36683991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70001875" y3="-4.60946775" z3="1.49888567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12096953" y3="-2.29610575" z3="1.11249146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15150931" y3="-2.05911739" z3="2.48237849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72476258" y3="-4.3723949" z3="2.87193994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88621956" y3="-5.61704729" z3="1.11719422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09695201" y3="-1.45764088" z3="0.45033743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06818698" y3="-1.05044619" z3="2.84232471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93755103" y3="-5.19625117" z3="3.55856643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46372815" y3="-2.91452538" z3="4.44545286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.43294835" y3="-1.77480463" z3="-3.86483601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.51300156" y3="-1.3582322" z3="-2.96113395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.30936381" y3="3.72969763" z3="-0.93542544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10687444" y3="-3.02759287" z3="-1.72871554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90674922" y3="-3.16406548" z3="-0.5904888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10459999" y3="-2.25648566" z3="0.30893768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82094608" y3="-0.67758377" z3="0.51643211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.52926764" y3="-0.15024615" z3="-1.12869022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52926859" y3="0.43674724" z3="1.23842414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.19752663" y3="-0.99979885" z3="1.74413267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40235426" y3="-4.3632704" z3="-0.32169716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1271803" y3="-4.55981065" z3="0.88297778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.7665474" y3="0.23957527" z3="-1.82034212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.26702251" y3="0.65661234" z3="-0.96325027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.0516002" y3="-0.98511551" z3="-1.62868931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60157188" y3="0.53521349" z3="0.64699672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.24261525" y3="0.08134248" z3="2.24428124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97665093" y3="1.44122727" z3="1.34812102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.66204548" y3="-0.04475389" z3="2.04501776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.99232907" y3="-1.63889745" z3="1.31727323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.80996888" y3="-1.48680234" z3="2.65881361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05513478" y3="-3.96498535" z3="0.88094269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51515177" y3="-4.29056238" z3="1.75760418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37235588" y3="-5.62986707" z3="0.90553694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27814881" y3="-2.19872218" z3="-0.18790264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14516067" y3="-3.31474717" z3="-1.02690558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51620821" y3="-4.47312337" z3="-0.58595042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01997218" y3="-4.50904854" z3="0.71143649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.16296488" y3="-3.43335623" z3="1.58299354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78764758" y3="-2.28005937" z3="1.12568813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49557137" y3="-3.26014378" z3="-2.06087011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3827966" y3="-5.3275096" z3="-1.24964799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.28585708" y3="-5.6921765" z3="1.1625524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75971157" y3="-3.49917255" z3="2.59457414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87796081" y3="-1.42149621" z3="1.79234619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49333974" y3="4.01342767" z3="0.17720231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8689846" y3="3.82890183" z3="0.13333021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43989559" y3="3.36526999" z3="-1.0469481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67576893" y3="3.10312303" z3="-2.1814278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29929865" y3="3.27860259" z3="-2.1154941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0232829" y3="4.33834684" z3="1.10865049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4968114" y3="4.02089567" z3="1.00458593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.88305588" y3="3.11890292" z3="-1.09001178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.16108773" y3="2.75348819" z3="-3.09347238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3149446" y3="3.0471379" z3="-2.98751035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18868545" y3="-5.8810202" z3="2.35414656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.79744304" y3="-6.41235077" z3="0.31089669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.4010835" y3="2.9596672" z3="-2.17528784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48155951" y3="3.06929411" z3="-0.0310085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55173765" y3="0.1629689" z3="-2.12616382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88048703" y3="1.40959939" z3="-1.9649108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70184019" y3="0.09203432" z3="-2.95993394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.15320949" y3="1.19939819" z3="-3.63419063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.21439572" y3="-0.8690791" z3="-3.0652739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.03468536" y3="1.1322852" z3="-4.27768502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.3562269" y3="2.53097543" z3="-2.7005834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.46159652" y3="2.42849288" z3="-3.51047825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.82640928" y3="3.48266234" z3="-2.62420423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.80601083" y3="3.30296431" z3="-4.06976026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57376656" y3="3.89406401" z3="-0.26213598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7644512" y3="5.04282237" z3="-0.02297281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93793121" y3="3.93907566" z3="0.14144638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47517861" y3="5.07449153" z3="0.6988469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56285968" y3="3.05360522" z3="0.01192694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52554309" y3="5.08312835" z3="1.00249936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35286937" y3="6.20758446" z3="0.54262211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68023339" y3="6.22962024" z3="0.89074155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72140841" y3="7.08563192" z3="0.70754133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12128179" y3="7.12892667" z3="1.32948979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31500442" y3="-4.00871922" z3="-2.86510882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51706782" y3="-5.03071875" z3="-2.50912505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17170474" y3="-3.69403119" z3="-3.49071257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42756994" y3="-4.03579003" z3="-3.5176448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.65437032" y3="-1.65438719" z3="-2.14495063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.38437465" y3="-1.18988102" z3="-2.83239925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.48575515" y3="-0.97404237" z3="-1.29484208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70330943" y3="-1.71855953" z3="-2.69685707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8948,-.9569,-.7235;6.5529,-1.949,-1.6424;6.036,-.9965,-1.4914;4.7357,1.4747,-1.106;4.2667,.3084,-.5267;2.6179,2.7417,-1.1156;3.9768,2.733,-.8551;2.3735,4.9881,-.2991;1.7841,3.8557,-.8094;1.7563,5.8622,-.0707;2.0314,1.6224,-1.6321;3.1284,.3579,.2248;1.6902,.3854,-.5915;.6128,.725,.3713;1.6172,-.8507,-1.46;1.1057,-2.4911,-1.2863;2.1841,-5.5403,-6.1879;1.887,-5.1007,-5.2315;1.1125,-3.9464,-2.803;1.8524,-3.7198,-5.0915;1.5612,-5.9216,-4.1488;1.1891,-5.3383,-2.9445;1.4741,-3.1105,-3.8841;2.1127,-3.0569,-5.9203;1.6115,-7.0098,-4.2354;.976,-5.9676,-2.0762;.6819,-3.3922,-1.5706;-.3236,-3.88,-.8364;-.6578,-4.8845,-1.1078;-.3836,-3.5744,.6099;-.451,-3.0964,3.3668;-.7,-4.6095,1.4989;-.121,-2.2961,1.1125;-.1515,-2.0591,2.4824;-.7248,-4.3724,2.8719;-.8862,-5.617,1.1172;.097,-1.4576,.4503;.0682,-1.0504,2.8423;-.9376,-5.1963,3.5586;-.4637,-2.9145,4.4455;1.4329,-1.7748,-3.8648;1.513,-1.3582,-2.9611;.3094,3.7297,-.9354;-2.1069,-3.0276,-1.7287;-2.9067,-3.1641,-.5905;-3.1046,-2.2565,.3089;-3.8209,-.6776,.5164;-4.5293,-.1502,-1.1287;-2.5293,.4367,1.2384;-5.1975,-.9998,1.7441;-3.4024,-4.3633,-.3217;-4.1272,-4.5598,.883;-3.7665,.2396,-1.8203;-5.267,.6566,-.9633;-5.0516,-.9851,-1.6287;-1.6016,.5352,.647;-2.2426,.0813,2.2443;-2.9767,1.4412,1.3481;-5.662,-.0448,2.045;-5.9923,-1.6389,1.3173;-4.81,-1.4868,2.6588;-5.0551,-3.965,.8809;-3.5152,-4.2906,1.7576;-4.3724,-5.6299,.9055;4.2781,-2.1987,-.1879;4.1452,-3.3147,-1.0269;3.5162,-4.4731,-.586;3.02,-4.509,.7114;3.163,-3.4334,1.583;3.7876,-2.2801,1.1257;4.4956,-3.2601,-2.0609;3.3828,-5.3275,-1.2496;2.2859,-5.6922,1.1626;2.7597,-3.4992,2.5946;3.878,-1.4215,1.7923;-.4933,4.0134,.1772;-1.869,3.8289,.1333;-2.4399,3.3653,-1.0469;-1.6758,3.1031,-2.1814;-.2993,3.2786,-2.1155;-.0233,4.3383,1.1087;-2.4968,4.0209,1.0046;-3.8831,3.1189,-1.09;-2.1611,2.7535,-3.0935;.3149,3.0471,-2.9875;2.1887,-5.881,2.3541;1.7974,-6.4124,.3109;-4.4011,2.9597,-2.1753;-4.4816,3.0693,-.031;6.5517,.163,-2.1262;5.8805,1.4096,-1.9649;7.7018,.092,-2.9599;8.1532,1.1994,-3.6342;8.2144,-.8691,-3.0653;9.0347,1.1323,-4.2777;6.3562,2.531,-2.7006;7.4616,2.4285,-3.5105;5.8264,3.4827,-2.6242;7.806,3.303,-4.0698;4.5738,3.8941,-.2621;3.7645,5.0428,-.023;5.9379,3.9391,.1414;6.4752,5.0745,.6988;6.5629,3.0536,.0119;7.5255,5.0831,1.0025;4.3529,6.2076,.5426;5.6802,6.2296,.8907;3.7214,7.0856,.7075;6.1213,7.1289,1.3295;-2.315,-4.0087,-2.8651;-2.5171,-5.0307,-2.5091;-3.1717,-3.694,-3.4907;-1.4276,-4.0358,-3.5176;-1.6544,-1.6544,-2.145;-2.3844,-1.1899,-2.8324;-1.4858,-.974,-1.2948;-.7033,-1.7186,-2.6969;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662797670597</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003515869469 0.000416674568 0.028963978951 0.005336146536</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057037644 -0.000871322 0.000064888 0.000331834 0.000378008 0.000395191 0.000463152 0.000517714 0.000636700 0.000716132 0.000889394 0.000919387 0.001115622 0.001187117 0.001331205 0.001392573 0.001427188 0.001573868 0.002213833 0.002362933 0.002462914 0.002604700 0.002827172 0.003398128 0.003515780 0.003837924 0.004306662 0.004593375 0.004772869 0.004874544 0.005207894 0.005264550 0.006238736 0.006244493 0.006772893 0.006940766 0.007166360 0.007444902 0.008172740 0.008580816 0.008889622 0.009365409 0.009723989 0.010364347 0.011074420 0.011310769 0.011627785 0.012449003 0.013252405 0.013642324 0.013955397 0.014582934 0.014923092 0.015466366 0.015761175 0.016570876 0.017091997 0.018552979 0.018839726 0.019411825 0.020328815 0.020536530 0.021225824 0.021822908 0.022266474 0.022740726 0.023382144 0.023856726 0.024501418 0.025853008 0.026551546 0.026917771 0.027176108 0.027585465 0.028173298 0.029061807 0.030845295 0.031486238 0.032896279 0.034063973 0.034623128 0.035900113 0.039012003 0.039453961 0.041928129 0.045373389 0.045886610 0.046820491 0.048669721 0.049656133 0.049817907 0.050711921 0.051533912 0.052151088 0.052284585 0.052390746 0.052727514 0.053363271 0.054912287 0.056000940 0.056357618 0.056688497 0.056972560 0.057002297 0.057716751 0.058554760 0.059214345 0.059672451 0.060934631 0.062011118 0.062716538 0.064212888 0.064525081 0.064978797 0.065950511 0.067422188 0.067910819 0.068919092 0.070516184 0.072044249 0.072589917 0.072805002 0.073034061 0.075507798 0.078551527 0.080806057 0.081531870 0.083309030 0.084520270 0.087854186 0.088758832 0.089350280 0.089798142 0.091298697 0.093305376 0.094572146 0.095472579 0.096180445 0.096818288 0.098396658 0.100093560 0.100595445 0.102596815 0.103676371 0.104140347 0.106329897 0.108691301 0.110644711 0.112177695 0.112679982 0.113689078 0.114554680 0.116855351 0.117101417 0.118508684 0.118665379 0.120509169 0.121882994 0.125036645 0.125571243 0.128447330 0.128933951 0.130813645 0.133526046 0.136281256 0.137701390 0.138623442 0.139610971 0.140246852 0.143406402 0.144521505 0.145688664 0.146739445 0.151804694 0.153417253 0.154066964 0.160575283 0.161205426 0.168460502 0.171317905 0.175874981 0.178784985 0.181379351 0.183959807 0.188837257 0.189788071 0.191779406 0.201191817 0.202163772 0.206268340 0.206900960 0.207228728 0.212150217 0.212510939 0.213497655 0.216581651 0.218131419 0.220198548 0.220793425 0.224447902 0.225424745 0.231844448 0.234532324 0.235383278 0.238391884 0.246418604 0.249057831 0.251626398 0.256508822 0.257177881 0.258240646 0.262444848 0.271563626 0.282845448 0.291900119 0.299832369 0.299969877 0.300975310 0.307024952 0.307771271 0.309770742 0.319783151 0.321325375 0.326310421 0.330051985 0.335538959 0.347685680 0.351987136 0.355591591 0.360399924 0.361591259 0.364080985 0.384363678 0.406773438 0.414076016 0.430204837 0.432558466 0.435268121 0.450775142 0.464590646 0.475008050 0.478803941 0.480312534 0.486605753 0.498892146 0.503760973 0.514343791 0.516797626 0.543759814 0.566907117 0.567659659 0.586534040 0.591971183 0.605657607 0.644132532 0.645306006 0.667948068 0.675565951 0.687351095 0.703551774 0.704339907 0.705688509 0.709240137 0.717109100 0.733844638 0.737964282 0.739151516 0.747739068 0.750751594 0.771606791 0.775964105 0.808636534 0.821675941 0.823878733 0.828904042 0.833954233 0.847099334 0.849268988 0.851362881 0.854488639 0.863266211 0.867467034 0.875321462 0.886859535 0.888801488 0.891218140 0.893221600 0.900980165 0.910100501 0.917898907 0.923167147 0.924453065 0.931760360 0.935445160 0.956008513 0.963453844 0.965063894 0.969965693 0.976264039 0.982374389 0.998592835 1.012017078 1.014908596 1.021144059 1.040028463 1.055035989 1.069574820 1.072374091 1.079346533 1.087306886 1.103485062 1.110264083 1.111614279 1.118749178 1.122505177 1.123518232 1.141823446 1.148718819 1.161737718 1.170031704 1.176633963 1.187194615 1.200736164 1.221188678 1.231504888 1.258092950 1.296380099 1.298065053 1.314664345 1.326422797 1.326865424 1.329957270 1.331337459 1.334703367 1.342079534 1.348594816 1.365319432 1.379942943 1.381276002 1.381658123 1.427559352 1.514119419 1.557954196 1.684714001 1.921773520</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">200</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89571004" y3="-0.9568109" z3="-0.71878039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55529512" y3="-1.95004875" z3="-1.63406005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.03860043" y3="-0.99712982" z3="-1.48413463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.73815944" y3="1.47472108" z3="-1.10249724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26771386" y3="0.3088153" z3="-0.52359249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62051899" y3="2.74184915" z3="-1.11802933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.97874856" y3="2.73329634" z3="-0.85470595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37519899" y3="4.99010468" z3="-0.30612127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78660655" y3="3.85663988" z3="-0.81533265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75768883" y3="5.86495793" z3="-0.07940172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03458122" y3="1.62218012" z3="-1.63413108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12774366" y3="0.3586907" z3="0.22546595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69158332" y3="0.38524097" z3="-0.59396133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61159344" y3="0.72388802" z3="0.36608037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62150985" y3="-0.850846" z3="-1.46247173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10498227" y3="-2.4887658" z3="-1.28809872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.17659715" y3="-5.53391147" z3="-6.19357425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8808845" y3="-5.09504282" z3="-5.23637788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10983553" y3="-3.94257552" z3="-2.805949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.84516455" y3="-3.71418801" z3="-5.09575217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55809175" y3="-5.916743" z3="-4.15339689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18761215" y3="-5.33438514" z3="-2.94805505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.46852919" y3="-3.10579242" z3="-3.88735106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.10312569" y3="-3.05058375" z3="-5.92474745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60942949" y3="-7.00493692" z3="-4.24063652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9765958" y3="-5.96421572" z3="-2.07972013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.68025775" y3="-3.38934339" z3="-1.57263086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32497006" y3="-3.87712665" z3="-0.83834914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.65902306" y3="-4.88187269" z3="-1.10950781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.384495" y3="-3.57133459" z3="0.6079916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44891764" y3="-3.09489292" z3="3.36560723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70044082" y3="-4.60624468" z3="1.49724736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12092809" y3="-2.29381751" z3="1.11077341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15039023" y3="-2.05739847" z3="2.4807819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72341811" y3="-4.37020558" z3="2.8705108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88595435" y3="-5.61491837" z3="1.11611199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0964559" y3="-1.45515886" z3="0.44863313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06924208" y3="-1.04847474" z3="2.84051736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93552863" y3="-5.19435425" z3="3.55676578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46107969" y3="-2.91310545" z3="4.44424877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.42574473" y3="-1.77014576" z3="-3.86709617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50951413" y3="-1.35468492" z3="-2.96332477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31202631" y3="3.72987928" z3="-0.94232746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.10908341" y3="-3.02499428" z3="-1.72913661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90843914" y3="-3.16592029" z3="-0.59144338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10674768" y3="-2.26129294" z3="0.3106771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82430188" y3="-0.68469871" z3="0.52323459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.54414861" y3="-0.15927866" z3="-1.11724074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53198833" y3="0.43495754" z3="1.23734882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18896264" y3="-1.00811577" z3="1.76156091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40204265" y3="-4.3669682" z3="-0.32529563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12680767" y3="-4.5675018" z3="0.87894122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.78538844" y3="0.22753338" z3="-1.81651088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.27496687" y3="0.65179416" z3="-0.94769058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.07510906" y3="-0.99356404" z3="-1.61234438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60332458" y3="0.53524105" z3="0.6427822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23929144" y3="0.08335192" z3="2.24167716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97981312" y3="1.43994355" z3="1.34613037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.65240099" y3="-0.04868729" z3="2.06040037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98656616" y3="-1.64709754" z3="1.34623721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.79187592" y3="-1.49220414" z3="2.6698349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05600494" y3="-3.97438461" z3="0.87747323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51540774" y3="-4.29845884" z3="1.7545384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36996601" y3="-5.63838602" z3="0.8992942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27733202" y3="-2.19845949" z3="-0.18477416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14422385" y3="-3.31355907" z3="-1.02497888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51391571" y3="-4.47162223" z3="-0.58571867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01701759" y3="-4.50852382" z3="0.71140363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15990877" y3="-3.43387393" z3="1.58403546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78547884" y3="-2.28056154" z3="1.12821081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49562968" y3="-3.25832417" z3="-2.05859479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3808269" y3="-5.32584568" z3="-1.25016148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.28266924" y3="-5.6919845" z3="1.16094657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75592709" y3="-3.50047827" z3="2.59525245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87569189" y3="-1.42278111" z3="1.79560812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49132852" y3="4.01416472" z3="0.17029822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86703349" y3="3.82841197" z3="0.12567854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43697873" y3="3.36161874" z3="-1.05366836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.67205654" y3="3.09819526" z3="-2.1872814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.29576877" y3="3.27573665" z3="-2.12150628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02194777" y3="4.34179126" z3="1.10084024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4956495" y3="4.02171168" z3="0.99534559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8798694" y3="3.11259878" z3="-1.09690483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15686885" y3="2.7462254" z3="-3.09888138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.31908206" y3="3.04303878" z3="-2.99265887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18595644" y3="-5.88283642" z3="2.35217726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.79355606" y3="-6.41041409" z3="0.30830213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39477488" y3="2.94276866" z3="-2.17936196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.48014728" y3="3.06992091" z3="-0.03981956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.55622631" y3="0.16192504" z3="-2.11802534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88487687" y3="1.40882343" z3="-1.95888859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.70819247" y3="0.09002344" z3="-2.9493907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.16124493" y3="1.1966685" z3="-3.62374033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2208019" y3="-0.87132563" z3="-3.05290963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.04407372" y3="1.12875324" z3="-4.26566199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36247546" y3="2.52949485" z3="-2.69445759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.46947169" y3="2.42602086" z3="-3.50230873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83277557" y3="3.48153764" z3="-2.61959267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.81510346" y3="3.29991753" z3="-4.06176688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57482488" y3="3.89545862" z3="-0.26293924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76544909" y3="5.04525163" z3="-0.02750587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93853604" y3="3.94066392" z3="0.14287627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47590058" y3="5.07725497" z3="0.6976905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56319648" y3="3.0544472" z3="0.01674561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52633943" y3="5.08582385" z3="1.00262148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35338317" y3="6.21125676" z3="0.53635339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68100507" y3="6.23341895" z3="0.88565281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72196995" y3="7.0904252" z3="0.69901555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12197135" y3="7.13372153" z3="1.32251088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31608099" y3="-4.00367124" z3="-2.86774728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51550407" y3="-5.02701815" z3="-2.51470501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17441322" y3="-3.68929138" z3="-3.49152514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.42923343" y3="-4.02651373" z3="-3.52086466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6590092" y3="-1.65013763" z3="-2.14199784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.3892753" y3="-1.18577573" z3="-2.82869876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49266902" y3="-0.9704449" z3="-1.29048483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.70732059" y3="-1.71143779" z3="-2.69317207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8957,-.9568,-.7188;6.5553,-1.95,-1.6341;6.0386,-.9971,-1.4841;4.7382,1.4747,-1.1025;4.2677,.3088,-.5236;2.6205,2.7418,-1.118;3.9787,2.7333,-.8547;2.3752,4.9901,-.3061;1.7866,3.8566,-.8153;1.7577,5.865,-.0794;2.0346,1.6222,-1.6341;3.1277,.3587,.2255;1.6916,.3852,-.594;.6116,.7239,.3661;1.6215,-.8508,-1.4625;1.105,-2.4888,-1.2881;2.1766,-5.5339,-6.1936;1.8809,-5.095,-5.2364;1.1098,-3.9426,-2.8059;1.8452,-3.7142,-5.0958;1.5581,-5.9167,-4.1534;1.1876,-5.3344,-2.9481;1.4685,-3.1058,-3.8874;2.1031,-3.0506,-5.9247;1.6094,-7.0049,-4.2406;.9766,-5.9642,-2.0797;.6803,-3.3893,-1.5726;-.325,-3.8771,-.8383;-.659,-4.8819,-1.1095;-.3845,-3.5713,.608;-.4489,-3.0949,3.3656;-.7004,-4.6062,1.4972;-.1209,-2.2938,1.1108;-.1504,-2.0574,2.4808;-.7234,-4.3702,2.8705;-.886,-5.6149,1.1161;.0965,-1.4552,.4486;.0692,-1.0485,2.8405;-.9355,-5.1944,3.5568;-.4611,-2.9131,4.4442;1.4257,-1.7701,-3.8671;1.5095,-1.3547,-2.9633;.312,3.7299,-.9423;-2.1091,-3.025,-1.7291;-2.9084,-3.1659,-.5914;-3.1067,-2.2613,.3107;-3.8243,-.6847,.5232;-4.5441,-.1593,-1.1172;-2.532,.435,1.2373;-5.189,-1.0081,1.7616;-3.402,-4.367,-.3253;-4.1268,-4.5675,.8789;-3.7854,.2275,-1.8165;-5.275,.6518,-.9477;-5.0751,-.9936,-1.6123;-1.6033,.5352,.6428;-2.2393,.0834,2.2417;-2.9798,1.4399,1.3461;-5.6524,-.0487,2.0604;-5.9866,-1.6471,1.3462;-4.7919,-1.4922,2.6698;-5.056,-3.9744,.8775;-3.5154,-4.2985,1.7545;-4.37,-5.6384,.8993;4.2773,-2.1985,-.1848;4.1442,-3.3136,-1.025;3.5139,-4.4716,-.5857;3.017,-4.5085,.7114;3.1599,-3.4339,1.584;3.7855,-2.2806,1.1282;4.4956,-3.2583,-2.0586;3.3808,-5.3258,-1.2502;2.2827,-5.692,1.1609;2.7559,-3.5005,2.5953;3.8757,-1.4228,1.7956;-.4913,4.0142,.1703;-1.867,3.8284,.1257;-2.437,3.3616,-1.0537;-1.6721,3.0982,-2.1873;-.2958,3.2757,-2.1215;-.0219,4.3418,1.1008;-2.4956,4.0217,.9953;-3.8799,3.1126,-1.0969;-2.1569,2.7462,-3.0989;.3191,3.043,-2.9927;2.186,-5.8828,2.3522;1.7936,-6.4104,.3083;-4.3948,2.9428,-2.1794;-4.4801,3.0699,-.0398;6.5562,.1619,-2.118;5.8849,1.4088,-1.9589;7.7082,.09,-2.9494;8.1612,1.1967,-3.6237;8.2208,-.8713,-3.0529;9.0441,1.1288,-4.2657;6.3625,2.5295,-2.6945;7.4695,2.426,-3.5023;5.8328,3.4815,-2.6196;7.8151,3.2999,-4.0618;4.5748,3.8955,-.2629;3.7654,5.0453,-.0275;5.9385,3.9407,.1429;6.4759,5.0773,.6977;6.5632,3.0544,.0167;7.5263,5.0858,1.0026;4.3534,6.2113,.5364;5.681,6.2334,.8857;3.722,7.0904,.699;6.122,7.1337,1.3225;-2.3161,-4.0037,-2.8677;-2.5155,-5.027,-2.5147;-3.1744,-3.6893,-3.4915;-1.4292,-4.0265,-3.5209;-1.659,-1.6501,-2.142;-2.3893,-1.1858,-2.8287;-1.4927,-.9704,-1.2905;-.7073,-1.7114,-2.6932;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662815904452</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003498979540 0.000389511808 0.024126545071 0.005335302448</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057044398 -0.000717082 0.000065676 0.000334599 0.000379192 0.000395155 0.000463439 0.000517643 0.000636980 0.000716038 0.000889700 0.000920170 0.001116623 0.001188126 0.001331679 0.001397234 0.001427785 0.001581793 0.002213715 0.002363108 0.002462768 0.002604515 0.002827281 0.003406982 0.003515854 0.003837805 0.004308605 0.004593536 0.004772794 0.004874262 0.005208040 0.005264982 0.006239258 0.006256336 0.006773067 0.006940554 0.007170011 0.007446780 0.008173402 0.008588716 0.008891458 0.009366770 0.009725772 0.010364180 0.011078286 0.011310297 0.011644860 0.012458783 0.013253458 0.013642551 0.013962914 0.014583303 0.014923201 0.015468589 0.015761213 0.016571456 0.017095538 0.018553023 0.018842973 0.019412851 0.020332041 0.020546935 0.021225231 0.021835474 0.022266507 0.022741006 0.023385026 0.023862605 0.024501539 0.025853486 0.026551654 0.026917959 0.027177313 0.027588401 0.028173512 0.029068539 0.030845410 0.031486283 0.032935135 0.034064830 0.034624793 0.035900153 0.039012249 0.039462612 0.041930399 0.045375921 0.045936961 0.046841248 0.048670935 0.049656320 0.049819333 0.050711994 0.051533919 0.052151190 0.052284651 0.052391009 0.052727687 0.053363370 0.054912725 0.056001314 0.056361934 0.056693592 0.056980090 0.057072625 0.057718009 0.058555268 0.059215916 0.059673001 0.060941409 0.062012332 0.062739888 0.064214516 0.064526399 0.064978819 0.065954862 0.067422585 0.067913052 0.068919290 0.070516278 0.072045453 0.072590610 0.072854314 0.073117767 0.075520208 0.078551620 0.080806183 0.081532989 0.083313815 0.084576658 0.088046065 0.088795974 0.089350428 0.089803150 0.091298738 0.093305811 0.094572683 0.095474132 0.096181239 0.096818510 0.098398333 0.100098264 0.100595514 0.102604827 0.103690143 0.104140511 0.106330758 0.108691400 0.110646809 0.112180006 0.112726301 0.113690652 0.114583021 0.116861781 0.117111514 0.118510399 0.118841414 0.120529628 0.121883379 0.125036305 0.125578773 0.128449891 0.128938972 0.130821100 0.133528514 0.136281629 0.137703555 0.138623767 0.139610964 0.140284923 0.143413033 0.144528212 0.145689686 0.146739601 0.151805310 0.153419053 0.154092006 0.160583168 0.161206500 0.168460633 0.171317791 0.175876732 0.178785576 0.181380329 0.183959517 0.188840801 0.189788114 0.191779851 0.201191783 0.202163911 0.206269942 0.206900975 0.207231143 0.212153163 0.212514659 0.213499720 0.216583567 0.218147935 0.220326461 0.220829060 0.224458952 0.225424897 0.231844564 0.234533463 0.235383551 0.238393094 0.246422670 0.249066688 0.251628462 0.256511984 0.257177931 0.258241998 0.262445898 0.271563633 0.282846008 0.291901734 0.299834913 0.299970409 0.300979860 0.307025569 0.307771454 0.309774749 0.319790066 0.321325454 0.326311255 0.330053578 0.335539938 0.347686476 0.351987372 0.355592336 0.360404031 0.361591414 0.364081698 0.384364271 0.406778262 0.414200637 0.430205292 0.432558602 0.435268597 0.450775786 0.464595288 0.475111632 0.478808018 0.480312618 0.486611412 0.498892411 0.503785374 0.514353509 0.516798607 0.543760639 0.566907459 0.567660306 0.586536780 0.592021633 0.605657749 0.644133816 0.645310134 0.667948225 0.675568977 0.687351083 0.703554667 0.704340427 0.705706135 0.709250161 0.717111933 0.733855379 0.737964563 0.739158871 0.747769415 0.750752953 0.771607155 0.775964559 0.808636467 0.821677903 0.823881920 0.828904257 0.833965101 0.847101331 0.849269735 0.851363197 0.854495028 0.863268681 0.867468229 0.875342492 0.887131275 0.889545569 0.891268720 0.893235011 0.900989554 0.910111846 0.917911117 0.923296581 0.924456073 0.931767379 0.935463736 0.956010121 0.963479939 0.965065539 0.969968294 0.976367387 0.982375743 0.998593686 1.012258701 1.014908934 1.021144439 1.040028704 1.055037261 1.069575956 1.072384277 1.079368210 1.087307517 1.103485979 1.110264442 1.111616366 1.118749219 1.122505173 1.123518503 1.141824699 1.148719225 1.161737918 1.170031717 1.176635521 1.187194646 1.200737434 1.221194345 1.231526988 1.258093132 1.296380284 1.298065141 1.314664774 1.326434172 1.326908507 1.329967309 1.331340456 1.334703384 1.342082492 1.348596141 1.365328258 1.379943133 1.381278558 1.381666267 1.427586420 1.514902907 1.557956140 1.684714108 1.922055333</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">201</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89653713" y3="-0.95642591" z3="-0.71487352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55788603" y3="-1.9508644" z3="-1.62530377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04124537" y3="-0.99765996" z3="-1.47738796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74073475" y3="1.47476572" z3="-1.10069965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26870529" y3="0.30951326" z3="-0.52170661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62330081" y3="2.74254026" z3="-1.12076432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98129067" y3="2.73389853" z3="-0.85540791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37641654" y3="4.9916025" z3="-0.31063876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.78855898" y3="3.85760296" z3="-0.8197448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75851438" y3="5.86659124" z3="-0.08599744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.03829631" y3="1.62251351" z3="-1.63715916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12751501" y3="0.36025788" z3="0.22546972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69244108" y3="0.38722968" z3="-0.59633781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61118627" y3="0.72820172" z3="0.36146258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62300768" y3="-0.84974734" z3="-1.46380296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10360378" y3="-2.48639596" z3="-1.29041581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.16950663" y3="-5.52853639" z3="-6.19898256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8750048" y3="-5.09025798" z3="-5.24113165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10695291" y3="-3.93938214" z3="-2.80903162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.83842405" y3="-3.70945925" z3="-5.0999275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.55463672" y3="-5.91261146" z3="-4.15794978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18560072" y3="-5.33105188" z3="-2.95173371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.46319725" y3="-3.10189917" z3="-3.89070343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.09448164" y3="-3.04533181" z3="-5.92909435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60666807" y3="-7.00071931" z3="-4.24575239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97621544" y3="-5.9613327" z3="-2.08331956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67843466" y3="-3.38680066" z3="-1.57512026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32666102" y3="-3.87481897" z3="-0.84031903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66085012" y3="-4.87941515" z3="-1.11168962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38457611" y3="-3.56986998" z3="0.60624673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44880123" y3="-3.09229158" z3="3.36350864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69963529" y3="-4.60495615" z3="1.49551463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12179364" y3="-2.29157243" z3="1.1087562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.15051595" y3="-2.05503298" z3="2.47878948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72283435" y3="-4.36809269" z3="2.86867236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88492048" y3="-5.61344466" z3="1.11437341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09496455" y3="-1.45291254" z3="0.4464583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.06912182" y3="-1.04616095" z3="2.83851262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9345444" y3="-5.19212453" z3="3.55515635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.46032533" y3="-2.91063059" z3="4.44216693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41885878" y3="-1.76626074" z3="-3.86957651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.5067252" y3="-1.35153424" z3="-2.96595276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31424999" y3="3.7299976" z3="-0.94845597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11026856" y3="-3.02216969" z3="-1.72828643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.90939568" y3="-3.16650821" z3="-0.59035942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10848828" y3="-2.26475721" z3="0.31450188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8254995" y3="-0.68783666" z3="0.53125842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.55843538" y3="-0.1667385" z3="-1.10460125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53011996" y3="0.43441579" z3="1.2345299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.18199333" y3="-1.01393365" z3="1.77921669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40197474" y3="-4.36846452" z3="-0.32796417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1269838" y3="-4.57309502" z3="0.87533947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.80566583" y3="0.21324995" z3="-1.81259685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.28666393" y3="0.64717807" z3="-0.93167375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.09625087" y3="-1.00117521" z3="-1.58976123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60825605" y3="0.53434127" z3="0.63467903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.23227661" y3="0.08447675" z3="2.23878819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97993589" y3="1.43833812" z3="1.34383038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.64623564" y3="-0.06003314" z3="2.08452692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.98020243" y3="-1.65759212" z3="1.36528201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.77840749" y3="-1.49735415" z3="2.68773813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0563772" y3="-3.98065293" z3="0.87579152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51611063" y3="-4.30655545" z3="1.75159936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36939994" y3="-5.64396735" z3="0.89242114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27619296" y3="-2.19770299" z3="-0.18228174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14307436" y3="-3.31195917" z3="-1.02361145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.51200628" y3="-4.47031933" z3="-0.58584093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01431213" y3="-4.50814152" z3="0.71094791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15672172" y3="-3.4340833" z3="1.58453557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78299458" y3="-2.2805104" z3="1.13012879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49551573" y3="-3.25590592" z3="-2.05680963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3788713" y3="-5.32371729" z3="-1.25114953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27989792" y3="-5.69211708" z3="1.15920824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75195476" y3="-3.50142091" z3="2.59540145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87297966" y3="-1.42319011" z3="1.79824378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49066115" y3="4.01492564" z3="0.16240488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86563269" y3="3.82610716" z3="0.11733285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43355123" y3="3.35616538" z3="-1.06179081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66727252" y3="3.09298269" z3="-2.19457893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.291792" y3="3.27414069" z3="-2.12827546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02236645" y3="4.34355885" z3="1.09377578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4953747" y3="4.01943067" z3="0.98640036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87560842" y3="3.10353259" z3="-1.10507601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.15025144" y3="2.73832112" z3="-3.10590304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32400064" y3="3.04213295" z3="-2.99927621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18301825" y3="-5.88401663" z3="2.35031348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.79112888" y3="-6.41009526" z3="0.30588865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.39028411" y3="2.92903644" z3="-2.1895939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.476736" y3="3.06446478" z3="-0.04717326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56078175" y3="0.16076894" z3="-2.11087005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.88928841" y3="1.40784848" z3="-1.95451932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.71483985" y3="0.08807768" z3="-2.93906245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.1698869" y3="1.19419772" z3="-3.61287953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2274744" y3="-0.87343293" z3="-3.04050354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.05439797" y3="1.12574863" z3="-4.2521401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.36887598" y3="2.52781206" z3="-2.68988138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.47803888" y3="2.42369796" z3="-3.4943358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.83915397" y3="3.4798797" z3="-2.61751002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.825307" y3="3.29720206" z3="-4.05335769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57664332" y3="3.89675837" z3="-0.26400707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76677412" y3="5.0468831" z3="-0.0310004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93990906" y3="3.94265457" z3="0.14330377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47627222" y3="5.08019934" z3="0.69724659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56503111" y3="3.05623118" z3="0.01878213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52623635" y3="5.08947044" z3="1.00326018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35402469" y3="6.21377383" z3="0.53169064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68091644" y3="6.23668401" z3="0.88267569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72221469" y3="7.09289474" z3="0.69169152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.12129734" y3="7.1377799" z3="1.31851038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31727565" y3="-3.99793077" z3="-2.86952791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51484912" y3="-5.02261544" z3="-2.51886527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.1763758" y3="-3.68277466" z3="-3.49146028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43108721" y3="-4.01798001" z3="-3.5238658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66202537" y3="-1.64563646" z3="-2.13846727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39286155" y3="-1.18135091" z3="-2.82523645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.49718816" y3="-0.96760839" z3="-1.28585127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71006043" y3="-1.70447222" z3="-2.68944619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8965,-.9564,-.7149;6.5579,-1.9509,-1.6253;6.0412,-.9977,-1.4774;4.7407,1.4748,-1.1007;4.2687,.3095,-.5217;2.6233,2.7425,-1.1208;3.9813,2.7339,-.8554;2.3764,4.9916,-.3106;1.7886,3.8576,-.8197;1.7585,5.8666,-.086;2.0383,1.6225,-1.6372;3.1275,.3603,.2255;1.6924,.3872,-.5963;.6112,.7282,.3615;1.623,-.8497,-1.4638;1.1036,-2.4864,-1.2904;2.1695,-5.5285,-6.199;1.875,-5.0903,-5.2411;1.107,-3.9394,-2.809;1.8384,-3.7095,-5.0999;1.5546,-5.9126,-4.1579;1.1856,-5.3311,-2.9517;1.4632,-3.1019,-3.8907;2.0945,-3.0453,-5.9291;1.6067,-7.0007,-4.2458;.9762,-5.9613,-2.0833;.6784,-3.3868,-1.5751;-.3267,-3.8748,-.8403;-.6609,-4.8794,-1.1117;-.3846,-3.5699,.6062;-.4488,-3.0923,3.3635;-.6996,-4.605,1.4955;-.1218,-2.2916,1.1088;-.1505,-2.055,2.4788;-.7228,-4.3681,2.8687;-.8849,-5.6134,1.1144;.095,-1.4529,.4465;.0691,-1.0462,2.8385;-.9345,-5.1921,3.5552;-.4603,-2.9106,4.4422;1.4189,-1.7663,-3.8696;1.5067,-1.3515,-2.966;.3142,3.73,-.9485;-2.1103,-3.0222,-1.7283;-2.9094,-3.1665,-.5904;-3.1085,-2.2648,.3145;-3.8255,-.6878,.5313;-4.5584,-.1667,-1.1046;-2.5301,.4344,1.2345;-5.182,-1.0139,1.7792;-3.402,-4.3685,-.328;-4.127,-4.5731,.8753;-3.8057,.2132,-1.8126;-5.2867,.6472,-.9317;-5.0963,-1.0012,-1.5898;-1.6083,.5343,.6347;-2.2323,.0845,2.2388;-2.9799,1.4383,1.3438;-5.6462,-.06,2.0845;-5.9802,-1.6576,1.3653;-4.7784,-1.4974,2.6877;-5.0564,-3.9807,.8758;-3.5161,-4.3066,1.7516;-4.3694,-5.644,.8924;4.2762,-2.1977,-.1823;4.1431,-3.312,-1.0236;3.512,-4.4703,-.5858;3.0143,-4.5081,.7109;3.1567,-3.4341,1.5845;3.783,-2.2805,1.1301;4.4955,-3.2559,-2.0568;3.3789,-5.3237,-1.2511;2.2799,-5.6921,1.1592;2.752,-3.5014,2.5954;3.873,-1.4232,1.7982;-.4907,4.0149,.1624;-1.8656,3.8261,.1173;-2.4336,3.3562,-1.0618;-1.6673,3.093,-2.1946;-.2918,3.2741,-2.1283;-.0224,4.3436,1.0938;-2.4954,4.0194,.9864;-3.8756,3.1035,-1.1051;-2.1503,2.7383,-3.1059;.324,3.0421,-2.9993;2.183,-5.884,2.3503;1.7911,-6.4101,.3059;-4.3903,2.929,-2.1896;-4.4767,3.0645,-.0472;6.5608,.1608,-2.1109;5.8893,1.4078,-1.9545;7.7148,.0881,-2.9391;8.1699,1.1942,-3.6129;8.2275,-.8734,-3.0405;9.0544,1.1257,-4.2521;6.3689,2.5278,-2.6899;7.478,2.4237,-3.4943;5.8392,3.4799,-2.6175;7.8253,3.2972,-4.0534;4.5766,3.8968,-.264;3.7668,5.0469,-.031;5.9399,3.9427,.1433;6.4763,5.0802,.6972;6.565,3.0562,.0188;7.5262,5.0895,1.0033;4.354,6.2138,.5317;5.6809,6.2367,.8827;3.7222,7.0929,.6917;6.1213,7.1378,1.3185;-2.3173,-3.9979,-2.8695;-2.5148,-5.0226,-2.5189;-3.1764,-3.6828,-3.4915;-1.4311,-4.018,-3.5239;-1.662,-1.6456,-2.1385;-2.3929,-1.1814,-2.8252;-1.4972,-.9676,-1.2859;-.7101,-1.7045,-2.6894;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662832147207</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003229613264 0.000362692867 0.028312652812 0.005338616421</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057050212 -0.000593315 0.000067310 0.000334846 0.000379260 0.000397431 0.000464595 0.000517614 0.000637527 0.000716016 0.000889765 0.000925134 0.001122178 0.001190077 0.001334044 0.001398904 0.001436039 0.001591333 0.002213840 0.002363079 0.002462848 0.002604983 0.002828068 0.003406332 0.003518513 0.003838618 0.004308497 0.004599172 0.004774939 0.004876627 0.005208073 0.005264828 0.006239508 0.006265907 0.006776121 0.006940517 0.007173684 0.007446432 0.008173790 0.008591031 0.008892824 0.009366782 0.009726154 0.010364505 0.011080139 0.011309655 0.011663544 0.012471470 0.013253335 0.013643194 0.013965968 0.014583780 0.014923160 0.015469885 0.015761464 0.016571400 0.017095602 0.018553858 0.018845966 0.019414874 0.020335625 0.020559149 0.021227866 0.021848789 0.022267544 0.022741270 0.023385584 0.023865222 0.024501678 0.025853736 0.026551683 0.026918180 0.027177449 0.027590938 0.028174303 0.029073273 0.030845843 0.031486390 0.032953482 0.034064822 0.034626631 0.035900242 0.039012563 0.039467042 0.041931911 0.045378885 0.045965640 0.046851255 0.048670863 0.049656505 0.049819970 0.050713264 0.051533952 0.052151234 0.052284658 0.052390995 0.052727673 0.053363398 0.054912679 0.056001349 0.056363098 0.056696283 0.056980094 0.057136692 0.057719777 0.058557119 0.059216348 0.059673833 0.060954466 0.062014330 0.062756040 0.064215354 0.064526983 0.064978912 0.065956278 0.067423480 0.067914136 0.068919666 0.070516285 0.072045609 0.072590609 0.072870226 0.073187297 0.075536379 0.078552204 0.080806279 0.081533156 0.083318342 0.084595419 0.088207475 0.088855684 0.089350496 0.089814302 0.091298749 0.093305848 0.094572641 0.095474519 0.096181596 0.096818618 0.098399420 0.100101951 0.100595914 0.102610244 0.103698968 0.104140426 0.106332033 0.108693079 0.110654288 0.112182957 0.112761842 0.113690740 0.114612356 0.116863563 0.117117626 0.118512189 0.118991914 0.120543765 0.121883755 0.125038949 0.125580888 0.128453160 0.128939687 0.130827427 0.133529624 0.136281927 0.137704444 0.138624139 0.139611041 0.140308519 0.143416418 0.144529849 0.145694945 0.146740477 0.151806985 0.153427896 0.154125851 0.160592176 0.161209155 0.168460611 0.171319184 0.175877818 0.178789207 0.181386541 0.183966303 0.188847844 0.189788444 0.191779766 0.201192019 0.202164529 0.206270587 0.206902092 0.207233182 0.212156062 0.212515751 0.213501215 0.216584071 0.218164783 0.220380557 0.220854766 0.224466298 0.225425044 0.231844582 0.234534679 0.235383787 0.238393382 0.246430488 0.249095366 0.251629052 0.256513198 0.257177954 0.258242266 0.262447744 0.271563649 0.282847229 0.291901901 0.299834917 0.299971097 0.300981190 0.307027703 0.307771620 0.309776938 0.319794816 0.321325628 0.326313927 0.330053734 0.335545363 0.347686679 0.351987463 0.355593247 0.360410046 0.361591942 0.364081857 0.384366726 0.406781383 0.414267747 0.430207319 0.432566780 0.435268909 0.450775778 0.464596638 0.475192134 0.478808937 0.480312714 0.486621289 0.498892563 0.503813145 0.514360268 0.516804315 0.543760671 0.566907720 0.567660507 0.586537333 0.592055468 0.605657906 0.644137595 0.645313209 0.667948414 0.675573184 0.687352166 0.703555250 0.704340449 0.705706418 0.709255555 0.717113901 0.733855293 0.737966187 0.739160346 0.747817090 0.750753855 0.771607531 0.775964811 0.808636432 0.821681599 0.823885562 0.828904310 0.833976122 0.847101941 0.849271108 0.851364898 0.854500752 0.863271938 0.867468943 0.875362344 0.887277706 0.890273434 0.891371388 0.893255565 0.900994714 0.910132968 0.917912128 0.923334207 0.924456107 0.931774584 0.935473459 0.956012778 0.963504632 0.965066735 0.969974269 0.976472650 0.982375812 0.998593809 1.012431271 1.014909810 1.021147158 1.040028885 1.055038285 1.069576452 1.072387248 1.079379864 1.087307539 1.103491673 1.110264678 1.111617731 1.118749250 1.122505540 1.123518635 1.141826240 1.148719458 1.161738154 1.170031722 1.176637010 1.187194781 1.200737662 1.221196391 1.231543001 1.258093170 1.296381476 1.298065509 1.314664787 1.326443914 1.326961414 1.329990042 1.331341802 1.334703442 1.342085382 1.348596823 1.365338698 1.379943866 1.381278844 1.381666259 1.427628465 1.515557928 1.557958165 1.684714134 1.922290834</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">202</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89717776" y3="-0.95662206" z3="-0.71152918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.55970275" y3="-1.95183937" z3="-1.61914207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04338396" y3="-0.99831769" z3="-1.47176777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74328659" y3="1.47487751" z3="-1.09668977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.26968246" y3="0.30962052" z3="-0.51889478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62621918" y3="2.74263389" z3="-1.12242766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98344342" y3="2.73422477" z3="-0.85390482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37880622" y3="4.9933914" z3="-0.31972293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7914688" y3="3.8583023" z3="-0.8263043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76088241" y3="5.86901669" z3="-0.09871234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04189899" y3="1.62223307" z3="-1.63858699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12716202" y3="0.36041432" z3="0.2262801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69367015" y3="0.38724521" z3="-0.59802409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61055933" y3="0.72812066" z3="0.35786671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62561454" y3="-0.84963945" z3="-1.46579119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10300852" y3="-2.48484945" z3="-1.29227592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.16198236" y3="-5.523242" z3="-6.20446973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.86882194" y3="-5.08556115" z3="-5.24594864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10406482" y3="-3.93622921" z3="-2.81215032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.83187213" y3="-3.70485617" z3="-5.10406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5506057" y3="-5.90857433" z3="-4.1626481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18316466" y3="-5.32777065" z3="-2.95558081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.45838123" y3="-3.09807974" z3="-3.89393754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.08631314" y3="-3.04025861" z3="-5.93334558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.60300927" y3="-6.99660221" z3="-4.25106866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97521967" y3="-5.95852732" z3="-2.08716342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67661479" y3="-3.3843763" z3="-1.5775058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32799132" y3="-3.87248967" z3="-0.84227898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66255514" y3="-4.87701941" z3="-1.11362695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3848361" y3="-3.56767342" z3="0.60446276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44642407" y3="-3.09111483" z3="3.36206494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69914959" y3="-4.60277576" z3="1.4939175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12121423" y3="-2.29004273" z3="1.10703636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14924231" y3="-2.05356092" z3="2.47704065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72085455" y3="-4.3666559" z3="2.867209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88493545" y3="-5.61100586" z3="1.11267747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09486469" y3="-1.45124836" z3="0.44467287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07086667" y3="-1.04493969" z3="2.83678896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93161507" y3="-5.19089014" z3="3.55381812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45734514" y3="-2.90939987" z3="4.44072804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.41350528" y3="-1.76247947" z3="-3.87204136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50335602" y3="-1.34855503" z3="-2.96795963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31723377" y3="3.72964313" z3="-0.95617587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11214661" y3="-3.01888488" z3="-1.72767078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91042674" y3="-3.16733131" z3="-0.58998114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10981281" y3="-2.2683909" z3="0.31754845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82870075" y3="-0.69335809" z3="0.53837839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.57327247" y3="-0.17434584" z3="-1.09309072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53259473" y3="0.43400231" z3="1.23397459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.1750046" y3="-1.02071733" z3="1.79656935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40136328" y3="-4.37077501" z3="-0.33016075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12591741" y3="-4.57906124" z3="0.87283871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.82519673" y3="0.20307471" z3="-1.80853659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.2952038" y3="0.64309431" z3="-0.91589993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.11860598" y3="-1.00831193" z3="-1.5720202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.60941954" y3="0.53561866" z3="0.63086059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22859163" y3="0.08771683" z3="2.23702168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98350531" y3="1.43728005" z3="1.3434895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.64010311" y3="-0.06405331" z3="2.10064666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.97431415" y3="-1.66555417" z3="1.39359466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.76304847" y3="-1.50053659" z3="2.70163704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0569382" y3="-3.98873239" z3="0.87351236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51586918" y3="-4.31209093" z3="1.74995538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3658606" y3="-5.65072581" z3="0.88810316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27524755" y3="-2.19786945" z3="-0.18073985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14195016" y3="-3.31112417" z3="-1.0233211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50984566" y3="-4.46937711" z3="-0.58713803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.01193912" y3="-4.50853857" z3="0.70954176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15415358" y3="-3.43540998" z3="1.58418836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78085767" y3="-2.28151179" z3="1.13113657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49493042" y3="-3.25404065" z3="-2.05627595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37642191" y3="-5.32191633" z3="-1.25342442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27754419" y3="-5.69296994" z3="1.15644845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74878099" y3="-3.50356201" z3="2.5947618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87020058" y3="-1.42440893" z3="1.79976665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48873146" y3="4.01519084" z3="0.15419573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86373171" y3="3.82456944" z3="0.10836821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.43023882" y3="3.35137588" z3="-1.07008128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.66281474" y3="3.08722721" z3="-2.20190401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28725666" y3="3.27005187" z3="-2.13470712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02213672" y3="4.34749739" z3="1.08412399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49414615" y3="4.01790747" z3="0.9772286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.87209219" y3="3.0960334" z3="-1.11431491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.14497955" y3="2.73005958" z3="-3.11283886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.32973084" y3="3.03652078" z3="-3.00381109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18099238" y3="-5.88655031" z3="2.34730819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78845593" y3="-6.40959155" z3="0.3022364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.38344222" y3="2.91058678" z3="-2.19625409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47520374" y3="3.064306" z3="-0.05835663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56484626" y3="0.16003442" z3="-2.10368905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89353293" y3="1.40747739" z3="-1.9484249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72062646" y3="0.08671531" z3="-2.9295363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.17747805" y3="1.19250803" z3="-3.60266815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23312383" y3="-0.87504061" z3="-3.02973246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.06335348" y3="1.12359432" z3="-4.24015251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.37494708" y3="2.52705272" z3="-2.68323347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.48562657" y3="2.42221951" z3="-3.48582031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.84536587" y3="3.47938808" z3="-2.61219886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.83419413" y3="3.29537227" z3="-4.04461154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57762053" y3="3.89813339" z3="-0.26364201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76809513" y3="5.04907999" z3="-0.0365523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93929645" y3="3.94443805" z3="0.1479684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4748022" y3="5.08312278" z3="0.70031057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56373222" y3="3.05745001" z3="0.02845913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52345397" y3="5.09269219" z3="1.01005006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35455009" y3="6.21722189" z3="0.52413788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.68024844" y3="6.24043061" z3="0.87910319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72321631" y3="7.09724989" z3="0.67957592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11989612" y3="7.14248799" z3="1.31359102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.31858339" y3="-3.99183673" z3="-2.87130514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51482764" y3="-5.01754162" z3="-2.52366055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.17863977" y3="-3.67619271" z3="-3.49201996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43274974" y3="-4.00913576" z3="-3.52608351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66530792" y3="-1.6411179" z3="-2.13437684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.39602648" y3="-1.17628664" z3="-2.820236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50246876" y3="-0.96424006" z3="-1.28026242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.71280031" y3="-1.69750995" z3="-2.68476526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8972,-.9566,-.7115;6.5597,-1.9518,-1.6191;6.0434,-.9983,-1.4718;4.7433,1.4749,-1.0967;4.2697,.3096,-.5189;2.6262,2.7426,-1.1224;3.9834,2.7342,-.8539;2.3788,4.9934,-.3197;1.7915,3.8583,-.8263;1.7609,5.869,-.0987;2.0419,1.6222,-1.6386;3.1272,.3604,.2263;1.6937,.3872,-.598;.6106,.7281,.3579;1.6256,-.8496,-1.4658;1.103,-2.4848,-1.2923;2.162,-5.5232,-6.2045;1.8688,-5.0856,-5.2459;1.1041,-3.9362,-2.8122;1.8319,-3.7049,-5.1041;1.5506,-5.9086,-4.1626;1.1832,-5.3278,-2.9556;1.4584,-3.0981,-3.8939;2.0863,-3.0403,-5.9333;1.603,-6.9966,-4.2511;.9752,-5.9585,-2.0872;.6766,-3.3844,-1.5775;-.328,-3.8725,-.8423;-.6626,-4.877,-1.1136;-.3848,-3.5677,.6045;-.4464,-3.0911,3.3621;-.6991,-4.6028,1.4939;-.1212,-2.29,1.107;-.1492,-2.0536,2.477;-.7209,-4.3667,2.8672;-.8849,-5.611,1.1127;.0949,-1.4512,.4447;.0709,-1.0449,2.8368;-.9316,-5.1909,3.5538;-.4573,-2.9094,4.4407;1.4135,-1.7625,-3.872;1.5034,-1.3486,-2.968;.3172,3.7296,-.9562;-2.1121,-3.0189,-1.7277;-2.9104,-3.1673,-.59;-3.1098,-2.2684,.3175;-3.8287,-.6934,.5384;-4.5733,-.1743,-1.0931;-2.5326,.434,1.234;-5.175,-1.0207,1.7966;-3.4014,-4.3708,-.3302;-4.1259,-4.5791,.8728;-3.8252,.2031,-1.8085;-5.2952,.6431,-.9159;-5.1186,-1.0083,-1.572;-1.6094,.5356,.6309;-2.2286,.0877,2.237;-2.9835,1.4373,1.3435;-5.6401,-.0641,2.1006;-5.9743,-1.6656,1.3936;-4.763,-1.5005,2.7016;-5.0569,-3.9887,.8735;-3.5159,-4.3121,1.75;-4.3659,-5.6507,.8881;4.2752,-2.1979,-.1807;4.142,-3.3111,-1.0233;3.5098,-4.4694,-.5871;3.0119,-4.5085,.7095;3.1542,-3.4354,1.5842;3.7809,-2.2815,1.1311;4.4949,-3.254,-2.0563;3.3764,-5.3219,-1.2534;2.2775,-5.693,1.1564;2.7488,-3.5036,2.5948;3.8702,-1.4244,1.7998;-.4887,4.0152,.1542;-1.8637,3.8246,.1084;-2.4302,3.3514,-1.0701;-1.6628,3.0872,-2.2019;-.2873,3.2701,-2.1347;-.0221,4.3475,1.0841;-2.4941,4.0179,.9772;-3.8721,3.096,-1.1143;-2.145,2.7301,-3.1128;.3297,3.0365,-3.0038;2.181,-5.8866,2.3473;1.7885,-6.4096,.3022;-4.3834,2.9106,-2.1963;-4.4752,3.0643,-.0584;6.5648,.16,-2.1037;5.8935,1.4075,-1.9484;7.7206,.0867,-2.9295;8.1775,1.1925,-3.6027;8.2331,-.875,-3.0297;9.0634,1.1236,-4.2402;6.3749,2.5271,-2.6832;7.4856,2.4222,-3.4858;5.8454,3.4794,-2.6122;7.8342,3.2954,-4.0446;4.5776,3.8981,-.2636;3.7681,5.0491,-.0366;5.9393,3.9444,.148;6.4748,5.0831,.7003;6.5637,3.0575,.0285;7.5235,5.0927,1.0101;4.3546,6.2172,.5241;5.6802,6.2404,.8791;3.7232,7.0972,.6796;6.1199,7.1425,1.3136;-2.3186,-3.9918,-2.8713;-2.5148,-5.0175,-2.5237;-3.1786,-3.6762,-3.492;-1.4327,-4.0091,-3.5261;-1.6653,-1.6411,-2.1344;-2.396,-1.1763,-2.8202;-1.5025,-.9642,-1.2803;-.7128,-1.6975,-2.6848;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662846832574</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002523829782 0.000327657481 0.022860927726 0.005339782241</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057051459 -0.000537075 0.000068408 0.000335937 0.000379367 0.000399829 0.000464634 0.000518362 0.000637852 0.000716055 0.000889846 0.000937570 0.001129853 0.001190650 0.001338426 0.001398908 0.001452868 0.001604945 0.002214290 0.002363064 0.002463194 0.002605744 0.002830697 0.003411870 0.003525852 0.003842353 0.004308762 0.004609520 0.004780952 0.004890386 0.005208251 0.005265813 0.006240010 0.006271558 0.006782506 0.006940522 0.007174577 0.007451191 0.008174270 0.008590793 0.008893582 0.009367488 0.009726127 0.010364215 0.011080443 0.011308799 0.011680517 0.012487465 0.013254467 0.013646562 0.013968096 0.014584256 0.014923228 0.015470410 0.015762679 0.016572891 0.017096173 0.018554551 0.018847027 0.019416781 0.020337082 0.020567195 0.021238534 0.021857131 0.022274759 0.022743736 0.023385624 0.023866402 0.024501772 0.025853783 0.026551958 0.026918522 0.027177645 0.027592782 0.028174432 0.029078110 0.030846429 0.031487331 0.032963161 0.034064870 0.034627745 0.035900487 0.039013275 0.039468802 0.041933246 0.045382309 0.046004195 0.046851411 0.048670886 0.049657104 0.049820737 0.050715091 0.051533967 0.052151479 0.052284684 0.052391557 0.052727680 0.053363739 0.054913263 0.056001893 0.056363157 0.056697929 0.056980491 0.057188081 0.057721747 0.058560270 0.059216390 0.059675348 0.060973088 0.062016481 0.062761181 0.064215309 0.064526940 0.064979260 0.065956697 0.067423923 0.067915031 0.068919858 0.070516503 0.072046170 0.072590762 0.072878350 0.073272381 0.075544208 0.078552986 0.080806509 0.081533293 0.083322838 0.084597915 0.088289092 0.088889741 0.089350777 0.089825867 0.091299437 0.093305900 0.094572954 0.095474509 0.096181650 0.096820362 0.098399417 0.100102515 0.100597107 0.102615648 0.103701264 0.104140445 0.106332789 0.108703233 0.110670909 0.112187361 0.112784147 0.113690805 0.114630476 0.116863666 0.117123464 0.118515162 0.119090965 0.120551866 0.121885990 0.125055788 0.125581019 0.128457096 0.128939747 0.130835359 0.133529846 0.136282273 0.137705083 0.138624744 0.139611231 0.140319854 0.143416960 0.144529766 0.145709330 0.146741975 0.151814192 0.153452343 0.154165895 0.160599824 0.161226922 0.168461193 0.171327555 0.175879337 0.178799220 0.181403771 0.183992147 0.188857644 0.189790108 0.191781311 0.201192218 0.202165337 0.206270633 0.206904838 0.207234573 0.212159355 0.212516037 0.213502171 0.216586916 0.218200133 0.220411397 0.220893034 0.224475296 0.225425037 0.231844690 0.234535316 0.235383983 0.238393546 0.246431478 0.249101165 0.251630103 0.256513328 0.257177994 0.258242593 0.262449336 0.271563770 0.282849213 0.291907494 0.299835044 0.299971872 0.300981186 0.307031573 0.307771617 0.309777035 0.319807297 0.321325648 0.326318348 0.330054388 0.335558901 0.347689481 0.351989597 0.355593804 0.360412627 0.361592078 0.364081875 0.384373405 0.406782790 0.414311090 0.430209186 0.432567150 0.435270062 0.450775792 0.464597267 0.475253771 0.478808962 0.480312712 0.486634123 0.498892582 0.503829547 0.514364810 0.516814626 0.543760780 0.566908210 0.567660594 0.586537419 0.592077149 0.605658198 0.644138735 0.645316998 0.667949131 0.675576858 0.687355482 0.703555503 0.704340548 0.705712466 0.709257225 0.717114720 0.733855684 0.737967745 0.739162713 0.747828947 0.750754435 0.771607583 0.775964860 0.808637054 0.821686835 0.823888645 0.828904978 0.833986831 0.847101944 0.849274180 0.851371747 0.854502957 0.863274803 0.867469432 0.875384762 0.887347947 0.890718778 0.891588219 0.893283613 0.900994974 0.910155838 0.917938877 0.923334311 0.924457484 0.931782073 0.935479929 0.956017596 0.963527620 0.965071981 0.969994545 0.976685972 0.982375840 0.998593992 1.012560513 1.014912352 1.021153216 1.040028951 1.055038444 1.069577403 1.072387814 1.079383677 1.087307685 1.103506822 1.110264765 1.111618853 1.118749728 1.122507568 1.123520813 1.141828881 1.148719602 1.161738185 1.170031727 1.176637080 1.187194781 1.200737685 1.221196476 1.231557379 1.258093242 1.296384402 1.298066141 1.314666609 1.326451045 1.327004604 1.330033036 1.331342539 1.334703566 1.342086769 1.348596966 1.365350377 1.379945589 1.381278927 1.381675126 1.427688929 1.515988402 1.557960221 1.684714289 1.922477638</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">203</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.8981986" y3="-0.95639863" z3="-0.70773279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.56238566" y3="-1.95251957" z3="-1.61095107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04611857" y3="-0.99876986" z3="-1.46523871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74564359" y3="1.47473923" z3="-1.09507108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27067151" y3="0.31005093" z3="-0.51719945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.62849108" y3="2.74275752" z3="-1.1256283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98542232" y3="2.73438342" z3="-0.85491859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37872204" y3="4.99436428" z3="-0.32234806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79273372" y3="3.85883924" z3="-0.83035133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76007142" y3="5.87025844" z3="-0.10191032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0451213" y3="1.6220214" z3="-1.64212817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12677149" y3="0.36151191" z3="0.22578641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69491976" y3="0.38786729" z3="-0.60132906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60986343" y3="0.7293988" z3="0.35197095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62900294" y3="-0.84959539" z3="-1.46826742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10187983" y3="-2.48246008" z3="-1.29416692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.15464147" y3="-5.5183259" z3="-6.20902765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8625758" y3="-5.08110847" z3="-5.24994395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.10074117" y3="-3.93306766" z3="-2.81465836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.82457585" y3="-3.7003887" z3="-5.10769366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.54679391" y3="-5.90468106" z3="-4.16635826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.18076106" y3="-5.32452082" z3="-2.95850327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.45237782" y3="-3.09430329" z3="-3.89685785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.07712383" y3="-3.03533987" z3="-5.9372009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59997897" y3="-6.99267062" z3="-4.25519817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97447863" y3="-5.95561179" z3="-2.08990335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67469088" y3="-3.38180922" z3="-1.57929342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.32988525" y3="-3.86948006" z3="-0.84367572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66474275" y3="-4.87401032" z3="-1.11481543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38511403" y3="-3.56495545" z3="0.60326342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44405753" y3="-3.08874121" z3="3.36100236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69797285" y3="-4.60039219" z3="1.49290518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12191224" y3="-2.28687498" z3="1.10566541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14814257" y3="-2.05099233" z3="2.47584769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71854623" y3="-4.36426206" z3="2.86622962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88320999" y3="-5.60904934" z3="1.11192919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09303946" y3="-1.44770226" z3="0.44336532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07145703" y3="-1.04182827" z3="2.83534771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92824227" y3="-5.18877829" z3="3.55278736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45371415" y3="-2.90738273" z3="4.43972399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40567197" y3="-1.75866659" z3="-3.87420049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.50043896" y3="-1.34564103" z3="-2.97056004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.31895585" y3="3.72933564" z3="-0.96264025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11397222" y3="-3.01540257" z3="-1.72691722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91188958" y3="-3.16727087" z3="-0.58919073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11169481" y3="-2.27131852" z3="0.32111435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82993535" y3="-0.69623159" z3="0.54605179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.58760955" y3="-0.18248453" z3="-1.08025575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53141814" y3="0.43461252" z3="1.23060052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.16592395" y3="-1.02621646" z3="1.81411449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40178647" y3="-4.37162406" z3="-0.332945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12600962" y3="-4.58426044" z3="0.86934289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.84522063" y3="0.18870528" z3="-1.80384287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.30755419" y3="0.63731908" z3="-0.90098018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.13838075" y3="-1.01736251" z3="-1.55043464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61584642" y3="0.53715728" z3="0.62195166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.22147459" y3="0.09009841" z3="2.23294731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9845021" y3="1.43732776" z3="1.34066637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62978384" y3="-0.073119" z3="2.12350759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96729917" y3="-1.6740769" z3="1.4137584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.74674471" y3="-1.50587195" z3="2.71634272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05758012" y3="-3.99517049" z3="0.87238431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51609291" y3="-4.31939836" z3="1.74672623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36460703" y3="-5.6560084" z3="0.88155602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27458003" y3="-2.19744826" z3="-0.17839027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14121807" y3="-3.30979373" z3="-1.02221297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50837482" y3="-4.46828371" z3="-0.58761267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0097547" y3="-4.50841634" z3="0.70877951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15167248" y3="-3.4361012" z3="1.58452113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77910882" y3="-2.28202793" z3="1.13297832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49516687" y3="-3.25194822" z3="-2.05479916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.375288" y3="-5.32045526" z3="-1.25469467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27525805" y3="-5.69328865" z3="1.15421121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74577145" y3="-3.50515191" z3="2.59481955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86868042" y3="-1.4259241" z3="1.80261967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4889308" y3="4.01581844" z3="0.1455955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86325381" y3="3.822686" z3="0.09847386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42754233" y3="3.34630519" z3="-1.07992296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65837093" y3="3.08201962" z3="-2.21042107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.28368521" y3="3.26844818" z3="-2.14242693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02299865" y3="4.3482949" z3="1.07714179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49546171" y3="4.01732585" z3="0.96499308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86851401" y3="3.08709974" z3="-1.12434675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13843203" y3="2.72216166" z3="-3.12125433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.33413877" y3="3.03594429" z3="-3.012123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17879147" y3="-5.88835019" z3="2.34480169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78601651" y3="-6.40884428" z3="0.29917424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3789153" y3="2.89563828" z3="-2.20780027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47299627" y3="3.05995763" z3="-0.06818802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.56937334" y3="0.15911692" z3="-2.09660305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.89784954" y3="1.40659724" z3="-1.94397368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.72715961" y3="0.08522701" z3="-2.91946324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.18589871" y3="1.19058725" z3="-3.59202412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.23969993" y3="-0.87662792" z3="-3.01782481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.07328954" y3="1.12123173" z3="-4.2272441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38131526" y3="2.52569238" z3="-2.67816371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.49404012" y3="2.42043576" z3="-3.47756789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.8518603" y3="3.47814378" z3="-2.60891971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.84418981" y3="3.29334516" z3="-4.03573315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57861034" y3="3.89883426" z3="-0.26441666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76809678" y3="5.05020485" z3="-0.03783254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9405962" y3="3.94536239" z3="0.14778956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47572705" y3="5.0846403" z3="0.69939041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56584854" y3="3.05805934" z3="0.02841345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52505475" y3="5.09424559" z3="1.00877715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35374412" y3="6.2188788" z3="0.52314718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67994274" y3="6.24233893" z3="0.87821737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7216009" y3="7.09915038" z3="0.67843534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11926121" y3="7.14488983" z3="1.31223987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32039438" y3="-3.98578633" z3="-2.87290213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51427788" y3="-5.01299444" z3="-2.52745677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18157981" y3="-3.6696297" z3="-3.49144367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43531073" y3="-3.99957362" z3="-3.52869233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.66910193" y3="-1.63596363" z3="-2.13131519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40059564" y3="-1.17106846" z3="-2.81698649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.50681735" y3="-0.96038773" z3="-1.27640899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7165911" y3="-1.69055335" z3="-2.68194462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.8982,-.9564,-.7077;6.5624,-1.9525,-1.611;6.0461,-.9988,-1.4652;4.7456,1.4747,-1.0951;4.2707,.3101,-.5172;2.6285,2.7428,-1.1256;3.9854,2.7344,-.8549;2.3787,4.9944,-.3223;1.7927,3.8588,-.8304;1.7601,5.8703,-.1019;2.0451,1.622,-1.6421;3.1268,.3615,.2258;1.6949,.3879,-.6013;.6099,.7294,.352;1.629,-.8496,-1.4683;1.1019,-2.4825,-1.2942;2.1546,-5.5183,-6.209;1.8626,-5.0811,-5.2499;1.1007,-3.9331,-2.8147;1.8246,-3.7004,-5.1077;1.5468,-5.9047,-4.1664;1.1808,-5.3245,-2.9585;1.4524,-3.0943,-3.8969;2.0771,-3.0353,-5.9372;1.6,-6.9927,-4.2552;.9745,-5.9556,-2.0899;.6747,-3.3818,-1.5793;-.3299,-3.8695,-.8437;-.6647,-4.874,-1.1148;-.3851,-3.565,.6033;-.4441,-3.0887,3.361;-.698,-4.6004,1.4929;-.1219,-2.2869,1.1057;-.1481,-2.051,2.4758;-.7185,-4.3643,2.8662;-.8832,-5.609,1.1119;.093,-1.4477,.4434;.0715,-1.0418,2.8353;-.9282,-5.1888,3.5528;-.4537,-2.9074,4.4397;1.4057,-1.7587,-3.8742;1.5004,-1.3456,-2.9706;.319,3.7293,-.9626;-2.114,-3.0154,-1.7269;-2.9119,-3.1673,-.5892;-3.1117,-2.2713,.3211;-3.8299,-.6962,.5461;-4.5876,-.1825,-1.0803;-2.5314,.4346,1.2306;-5.1659,-1.0262,1.8141;-3.4018,-4.3716,-.3329;-4.126,-4.5843,.8693;-3.8452,.1887,-1.8038;-5.3076,.6373,-.901;-5.1384,-1.0174,-1.5504;-1.6158,.5372,.622;-2.2215,.0901,2.2329;-2.9845,1.4373,1.3407;-5.6298,-.0731,2.1235;-5.9673,-1.6741,1.4138;-4.7467,-1.5059,2.7163;-5.0576,-3.9952,.8724;-3.5161,-4.3194,1.7467;-4.3646,-5.656,.8816;4.2746,-2.1974,-.1784;4.1412,-3.3098,-1.0222;3.5084,-4.4683,-.5876;3.0098,-4.5084,.7088;3.1517,-3.4361,1.5845;3.7791,-2.282,1.133;4.4952,-3.2519,-2.0548;3.3753,-5.3205,-1.2547;2.2753,-5.6933,1.1542;2.7458,-3.5052,2.5948;3.8687,-1.4259,1.8026;-.4889,4.0158,.1456;-1.8633,3.8227,.0985;-2.4275,3.3463,-1.0799;-1.6584,3.082,-2.2104;-.2837,3.2684,-2.1424;-.023,4.3483,1.0771;-2.4955,4.0173,.965;-3.8685,3.0871,-1.1243;-2.1384,2.7222,-3.1213;.3341,3.0359,-3.0121;2.1788,-5.8884,2.3448;1.786,-6.4088,.2992;-4.3789,2.8956,-2.2078;-4.473,3.06,-.0682;6.5694,.1591,-2.0966;5.8978,1.4066,-1.944;7.7272,.0852,-2.9195;8.1859,1.1906,-3.592;8.2397,-.8766,-3.0178;9.0733,1.1212,-4.2272;6.3813,2.5257,-2.6782;7.494,2.4204,-3.4776;5.8519,3.4781,-2.6089;7.8442,3.2933,-4.0357;4.5786,3.8988,-.2644;3.7681,5.0502,-.0378;5.9406,3.9454,.1478;6.4757,5.0846,.6994;6.5658,3.0581,.0284;7.5251,5.0942,1.0088;4.3537,6.2189,.5231;5.6799,6.2423,.8782;3.7216,7.0992,.6784;6.1193,7.1449,1.3122;-2.3204,-3.9858,-2.8729;-2.5143,-5.013,-2.5275;-3.1816,-3.6696,-3.4914;-1.4353,-3.9996,-3.5287;-1.6691,-1.636,-2.1313;-2.4006,-1.1711,-2.817;-1.5068,-.9604,-1.2764;-.7166,-1.6906,-2.6819;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662858944870</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002293302896 0.000320142859 0.026704816146 0.005333693929</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057052062 -0.000525593 0.000069312 0.000335968 0.000379550 0.000400861 0.000466286 0.000518365 0.000638093 0.000716062 0.000890111 0.000948021 0.001139751 0.001190671 0.001340216 0.001399079 0.001468291 0.001621403 0.002215217 0.002366119 0.002464236 0.002607917 0.002831831 0.003428049 0.003539020 0.003849330 0.004312154 0.004627457 0.004786361 0.004914609 0.005209595 0.005272246 0.006242048 0.006280771 0.006792756 0.006940909 0.007174495 0.007454783 0.008174237 0.008595315 0.008893438 0.009370598 0.009726959 0.010364424 0.011080870 0.011310256 0.011697985 0.012500861 0.013256432 0.013651756 0.013968286 0.014584634 0.014923284 0.015470730 0.015766811 0.016577538 0.017102982 0.018554984 0.018847470 0.019418833 0.020337772 0.020578404 0.021252560 0.021863557 0.022288549 0.022749498 0.023386561 0.023866470 0.024501904 0.025853948 0.026553393 0.026918692 0.027181523 0.027594340 0.028174432 0.029080872 0.030846990 0.031490137 0.032963855 0.034064897 0.034628551 0.035900676 0.039013672 0.039469028 0.041933725 0.045383764 0.046023291 0.046858516 0.048670908 0.049658285 0.049821539 0.050717263 0.051533982 0.052152262 0.052284885 0.052393591 0.052727675 0.053365019 0.054915100 0.056003288 0.056363439 0.056698422 0.056982356 0.057216683 0.057724390 0.058563359 0.059216413 0.059677249 0.060991927 0.062017913 0.062762062 0.064215476 0.064527167 0.064979821 0.065956702 0.067424056 0.067915426 0.068919865 0.070516611 0.072047675 0.072590765 0.072880908 0.073313708 0.075555343 0.078553216 0.080807187 0.081533999 0.083327071 0.084597927 0.088352663 0.088916099 0.089351676 0.089838210 0.091300048 0.093306041 0.094573866 0.095474612 0.096181681 0.096824156 0.098399540 0.100102805 0.100599694 0.102618163 0.103701004 0.104140426 0.106332834 0.108721721 0.110698962 0.112191188 0.112798265 0.113691567 0.114644472 0.116868095 0.117128539 0.118519338 0.119162600 0.120556192 0.121892114 0.125077910 0.125582076 0.128461590 0.128939777 0.130844628 0.133529862 0.136282579 0.137704967 0.138625359 0.139611552 0.140324404 0.143416942 0.144531706 0.145737532 0.146743941 0.151828331 0.153493916 0.154203244 0.160605409 0.161265573 0.168461590 0.171345705 0.175879841 0.178818794 0.181431256 0.184038983 0.188868737 0.189792765 0.191782628 0.201194119 0.202167150 0.206270697 0.206908997 0.207235422 0.212162567 0.212516544 0.213502207 0.216586632 0.218243090 0.220424610 0.220922474 0.224480149 0.225425034 0.231844939 0.234535522 0.235383995 0.238393645 0.246434393 0.249122639 0.251630343 0.256513600 0.257178099 0.258243548 0.262450992 0.271563863 0.282852341 0.291922757 0.299835571 0.299972476 0.300981361 0.307036641 0.307771646 0.309777382 0.319810891 0.321325749 0.326322799 0.330054527 0.335582792 0.347697661 0.351994983 0.355594024 0.360416110 0.361592152 0.364082029 0.384386998 0.406784735 0.414330091 0.430210416 0.432574400 0.435270117 0.450775801 0.464597739 0.475305796 0.478809019 0.480313133 0.486648359 0.498892589 0.503835687 0.514369953 0.516833202 0.543760877 0.566908543 0.567660663 0.586537490 0.592087387 0.605658918 0.644139632 0.645320098 0.667949451 0.675581339 0.687358883 0.703556338 0.704340566 0.705713849 0.709260442 0.717114965 0.733865198 0.737970120 0.739196605 0.747846368 0.750754537 0.771607583 0.775964864 0.808639446 0.821693702 0.823890625 0.828905684 0.833997414 0.847102500 0.849277400 0.851376963 0.854503366 0.863276357 0.867469680 0.875410357 0.887391997 0.890901739 0.891923556 0.893327077 0.900995355 0.910193153 0.917954104 0.923362846 0.924464512 0.931787710 0.935485867 0.956019908 0.963549346 0.965080375 0.970013407 0.976876653 0.982376431 0.998596031 1.012660372 1.014920285 1.021161033 1.040029018 1.055038482 1.069579026 1.072387856 1.079383792 1.087308158 1.103541362 1.110264822 1.111620319 1.118750889 1.122511448 1.123526551 1.141833699 1.148719719 1.161738204 1.170031837 1.176637943 1.187194968 1.200737988 1.221196559 1.231572328 1.258093987 1.296387377 1.298069120 1.314670137 1.326455081 1.327042723 1.330090016 1.331342793 1.334703567 1.342086768 1.348597099 1.365354076 1.379948246 1.381279012 1.381702639 1.427774461 1.516335031 1.557960386 1.684714583 1.922658955</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">204</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.89901679" y3="-0.95644245" z3="-0.70543858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5645074" y3="-1.95319618" z3="-1.60569306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.04846247" y3="-0.99918433" z3="-1.46062185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.74832283" y3="1.47500524" z3="-1.09166135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27175378" y3="0.31021986" z3="-0.51522507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63165592" y3="2.74305776" z3="-1.12762009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98778953" y3="2.73489604" z3="-0.85351091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38093877" y3="4.99540054" z3="-0.33068148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79550384" y3="3.85920424" z3="-0.83700432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76218564" y3="5.87144629" z3="-0.11404373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.04962603" y3="1.62182275" z3="-1.64436847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12667385" y3="0.36158649" z3="0.22600898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69578863" y3="0.38926928" z3="-0.60315478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60977603" y3="0.7333576" z3="0.3482424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.62925413" y3="-0.84870796" z3="-1.46961537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10059428" y3="-2.48078919" z3="-1.29680255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.14580896" y3="-5.51445321" z3="-6.2146615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8553223" y3="-5.07760222" z3="-5.25495065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09729989" y3="-3.93049703" z3="-2.81811436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.81748584" y3="-3.69697265" z3="-5.11220664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5414835" y3="-5.90154847" z3="-4.17110161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17729562" y3="-5.32184648" z3="-2.96246915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.44731144" y3="-3.09136721" z3="-3.90054928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.06854523" y3="-3.03167226" z3="-5.94196909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59466591" y3="-6.98946636" z3="-4.26037444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97234222" y3="-5.95320276" z3="-2.09374734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67246916" y3="-3.3795499" z3="-1.58220752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33138694" y3="-3.86763533" z3="-0.84562255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.66695133" y3="-4.87181087" z3="-1.11702894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38496414" y3="-3.5637901" z3="0.60148761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44231726" y3="-3.08702008" z3="3.35914315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69760953" y3="-4.59896084" z3="1.49123879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12077921" y3="-2.28601167" z3="1.10378014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14638322" y3="-2.04961344" z3="2.47388418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71732113" y3="-4.36267075" z3="2.86459901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8835742" y3="-5.60732536" z3="1.11025085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09394362" y3="-1.44719988" z3="0.44102019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.07471013" y3="-1.04135835" z3="2.83360776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92690702" y3="-5.18687625" z3="3.55142691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45129732" y3="-2.90547788" z3="4.43786679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.40060825" y3="-1.75578908" z3="-3.87730532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49668199" y3="-1.34320567" z3="-2.97322327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32171213" y3="3.72877828" z3="-0.97093503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.11576791" y3="-3.01203511" z3="-1.7256346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91245733" y3="-3.16766559" z3="-0.5875979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1120118" y3="-2.27411264" z3="0.32521849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83184029" y3="-0.70062818" z3="0.55348265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.60028788" y3="-0.18954698" z3="-1.06966959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53279368" y3="0.43523793" z3="1.22946395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.15915757" y3="-1.03124373" z3="1.83140104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40095026" y3="-4.37335821" z3="-0.33364671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12481629" y3="-4.58897048" z3="0.86850814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.86217832" y3="0.17781874" z3="-1.80040501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.31404059" y3="0.63403784" z3="-0.88772765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.15835344" y3="-1.02371005" z3="-1.53276545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.61613863" y3="0.53897255" z3="0.61714383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.21645548" y3="0.09443026" z3="2.23068442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98745319" y3="1.43668525" z3="1.34004756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.62476348" y3="-0.0771696" z3="2.14096333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.96073057" y3="-1.68126024" z3="1.44046321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.73264057" y3="-1.50746951" z3="2.73258269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05772377" y3="-4.00178164" z3="0.87138948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51586353" y3="-4.32337536" z3="1.74671171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36116564" y3="-5.66149233" z3="0.87951088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27379143" y3="-2.19737517" z3="-0.177848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13964093" y3="-3.308552" z3="-1.02297028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50588808" y3="-4.46700702" z3="-0.58969134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0077531" y3="-4.50856114" z3="0.70684203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15013295" y3="-3.43725267" z3="1.58369256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77784865" y3="-2.28281752" z3="1.13325805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49365205" y3="-3.24952492" z3="-2.05545113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.371744" y3="-5.31787538" z3="-1.25784787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27334632" y3="-5.69392696" z3="1.15133472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74421959" y3="-3.50724547" z3="2.59392411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86707006" y3="-1.42664662" z3="1.80326577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4876965" y3="4.01549706" z3="0.13676217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86187454" y3="3.81996404" z3="0.08859504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42395225" y3="3.33976956" z3="-1.08900054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.65317928" y3="3.07479059" z3="-2.21839592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27869271" y3="3.26375978" z3="-2.14934346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02460238" y3="4.35250285" z3="1.0664754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49480544" y3="4.01360112" z3="0.95589624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86457505" y3="3.07755274" z3="-1.13474016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.13189218" y3="2.71207843" z3="-3.12889944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34096903" y3="3.0295112" z3="-3.01606752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17709639" y3="-5.89007389" z3="2.34184792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78416073" y3="-6.40890692" z3="0.29574588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.37159463" y3="2.87539689" z3="-2.21623063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47129901" y3="3.05769488" z3="-0.08034944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.57360917" y3="0.15872211" z3="-2.09026017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90221792" y3="1.40655553" z3="-1.93848532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73320763" y3="0.0844375" z3="-2.91061296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.19384704" y3="1.18971918" z3="-3.58195956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2456303" y3="-0.87765393" z3="-3.00798027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.08273935" y3="1.12012914" z3="-4.21509614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.38753154" y3="2.52545564" z3="-2.67179449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.50196922" y3="2.41975989" z3="-3.46897602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.85811185" y3="3.47806055" z3="-2.60398354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.85355012" y3="3.29251815" z3="-4.02647752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57967448" y3="3.90006554" z3="-0.2633473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76930905" y3="5.05157569" z3="-0.04261318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93956329" y3="3.94744042" z3="0.15370713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47274363" y3="5.08761904" z3="0.70519582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56443361" y3="3.06013404" z3="0.0390027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51990823" y3="5.09816396" z3="1.01921364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35367328" y3="6.22119613" z3="0.51697332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67763655" y3="6.24544056" z3="0.87734758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.72181521" y3="7.10148218" z3="0.66680345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11559563" y3="7.14872655" z3="1.31090009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32240378" y3="-3.97913011" z3="-2.87414377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51569502" y3="-5.00714175" z3="-2.53203547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18432219" y3="-3.66183817" z3="-3.4912624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.43792761" y3="-3.99083594" z3="-3.53094183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67181276" y3="-1.63151809" z3="-2.12621728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40337965" y3="-1.16575936" z3="-2.8106644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51124097" y3="-0.95762305" z3="-1.26945617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7189258" y3="-1.68355145" z3="-2.67645232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.899,-.9564,-.7054;6.5645,-1.9532,-1.6057;6.0485,-.9992,-1.4606;4.7483,1.475,-1.0917;4.2718,.3102,-.5152;2.6317,2.7431,-1.1276;3.9878,2.7349,-.8535;2.3809,4.9954,-.3307;1.7955,3.8592,-.837;1.7622,5.8714,-.114;2.0496,1.6218,-1.6444;3.1267,.3616,.226;1.6958,.3893,-.6032;.6098,.7334,.3482;1.6293,-.8487,-1.4696;1.1006,-2.4808,-1.2968;2.1458,-5.5145,-6.2147;1.8553,-5.0776,-5.255;1.0973,-3.9305,-2.8181;1.8175,-3.697,-5.1122;1.5415,-5.9015,-4.1711;1.1773,-5.3218,-2.9625;1.4473,-3.0914,-3.9005;2.0685,-3.0317,-5.942;1.5947,-6.9895,-4.2604;.9723,-5.9532,-2.0937;.6725,-3.3795,-1.5822;-.3314,-3.8676,-.8456;-.667,-4.8718,-1.117;-.385,-3.5638,.6015;-.4423,-3.087,3.3591;-.6976,-4.599,1.4912;-.1208,-2.286,1.1038;-.1464,-2.0496,2.4739;-.7173,-4.3627,2.8646;-.8836,-5.6073,1.1103;.0939,-1.4472,.441;.0747,-1.0414,2.8336;-.9269,-5.1869,3.5514;-.4513,-2.9055,4.4379;1.4006,-1.7558,-3.8773;1.4967,-1.3432,-2.9732;.3217,3.7288,-.9709;-2.1158,-3.012,-1.7256;-2.9125,-3.1677,-.5876;-3.112,-2.2741,.3252;-3.8318,-.7006,.5535;-4.6003,-.1895,-1.0697;-2.5328,.4352,1.2295;-5.1592,-1.0312,1.8314;-3.401,-4.3734,-.3336;-4.1248,-4.589,.8685;-3.8622,.1778,-1.8004;-5.314,.634,-.8877;-5.1584,-1.0237,-1.5328;-1.6161,.539,.6171;-2.2165,.0944,2.2307;-2.9875,1.4367,1.34;-5.6248,-.0772,2.141;-5.9607,-1.6813,1.4405;-4.7326,-1.5075,2.7326;-5.0577,-4.0018,.8714;-3.5159,-4.3234,1.7467;-4.3612,-5.6615,.8795;4.2738,-2.1974,-.1778;4.1396,-3.3086,-1.023;3.5059,-4.467,-.5897;3.0078,-4.5086,.7068;3.1501,-3.4373,1.5837;3.7778,-2.2828,1.1333;4.4937,-3.2495,-2.0555;3.3717,-5.3179,-1.2578;2.2733,-5.6939,1.1513;2.7442,-3.5072,2.5939;3.8671,-1.4266,1.8033;-.4877,4.0155,.1368;-1.8619,3.82,.0886;-2.424,3.3398,-1.089;-1.6532,3.0748,-2.2184;-.2787,3.2638,-2.1493;-.0246,4.3525,1.0665;-2.4948,4.0136,.9559;-3.8646,3.0776,-1.1347;-2.1319,2.7121,-3.1289;.341,3.0295,-3.0161;2.1771,-5.8901,2.3418;1.7842,-6.4089,.2957;-4.3716,2.8754,-2.2162;-4.4713,3.0577,-.0803;6.5736,.1587,-2.0903;5.9022,1.4066,-1.9385;7.7332,.0844,-2.9106;8.1938,1.1897,-3.582;8.2456,-.8777,-3.008;9.0827,1.1201,-4.2151;6.3875,2.5255,-2.6718;7.502,2.4198,-3.469;5.8581,3.4781,-2.604;7.8536,3.2925,-4.0265;4.5797,3.9001,-.2633;3.7693,5.0516,-.0426;5.9396,3.9474,.1537;6.4727,5.0876,.7052;6.5644,3.0601,.039;7.5199,5.0982,1.0192;4.3537,6.2212,.517;5.6776,6.2454,.8773;3.7218,7.1015,.6668;6.1156,7.1487,1.3109;-2.3224,-3.9791,-2.8741;-2.5157,-5.0071,-2.532;-3.1843,-3.6618,-3.4913;-1.4379,-3.9908,-3.5309;-1.6718,-1.6315,-2.1262;-2.4034,-1.1658,-2.8107;-1.5112,-.9576,-1.2695;-.7189,-1.6836,-2.6765;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662871269371</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001971431421 0.000278092535 0.021163587145 0.005333107173</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057052015 -0.000460135 0.000069717 0.000336249 0.000379578 0.000401371 0.000466324 0.000518859 0.000638090 0.000716752 0.000890236 0.000954934 0.001142764 0.001191046 0.001341311 0.001400215 0.001474189 0.001625310 0.002215182 0.002366740 0.002464138 0.002608299 0.002833045 0.003450863 0.003553030 0.003857568 0.004314789 0.004640111 0.004791822 0.004937260 0.005209775 0.005281811 0.006243153 0.006291756 0.006801910 0.006941514 0.007176876 0.007457313 0.008174360 0.008607491 0.008893941 0.009377760 0.009728661 0.010364385 0.011084506 0.011313951 0.011717871 0.012509415 0.013257850 0.013660354 0.013968407 0.014585045 0.014923753 0.015471816 0.015773378 0.016583472 0.017110306 0.018555077 0.018847449 0.019419407 0.020337629 0.020587759 0.021268866 0.021865542 0.022308886 0.022757169 0.023388639 0.023866609 0.024502199 0.025854801 0.026555877 0.026918875 0.027191784 0.027595377 0.028175548 0.029082518 0.030847454 0.031494237 0.032964616 0.034064988 0.034628753 0.035900671 0.039014437 0.039469463 0.041934079 0.045384621 0.046054469 0.046883311 0.048672232 0.049660605 0.049823033 0.050718928 0.051533980 0.052153330 0.052285146 0.052396684 0.052727737 0.053368549 0.054917302 0.056006031 0.056364401 0.056698770 0.056985287 0.057242374 0.057728264 0.058566635 0.059216635 0.059679489 0.061010868 0.062019006 0.062762021 0.064216490 0.064527846 0.064980722 0.065958273 0.067424083 0.067915574 0.068919917 0.070516881 0.072050299 0.072590836 0.072882909 0.073346546 0.075561138 0.078553215 0.080808588 0.081535428 0.083329965 0.084605982 0.088385338 0.088916000 0.089352910 0.089842519 0.091300871 0.093306456 0.094574665 0.095474785 0.096181659 0.096827740 0.098400216 0.100105827 0.100602754 0.102619060 0.103703634 0.104141134 0.106333129 0.108743156 0.110728959 0.112193788 0.112803594 0.113692382 0.114648003 0.116876629 0.117133820 0.118522860 0.119200123 0.120558513 0.121896875 0.125117597 0.125584951 0.128465028 0.128939908 0.130856482 0.133529880 0.136282858 0.137704945 0.138627937 0.139611980 0.140325705 0.143417016 0.144536742 0.145775179 0.146745958 0.151846977 0.153539187 0.154243101 0.160609885 0.161310516 0.168462589 0.171368318 0.175880833 0.178841616 0.181458864 0.184081931 0.188882666 0.189796042 0.191784376 0.201197120 0.202168352 0.206271479 0.206912041 0.207235506 0.212163716 0.212517410 0.213506713 0.216586679 0.218312158 0.220431006 0.220951103 0.224490491 0.225425070 0.231845154 0.234535538 0.235384027 0.238393719 0.246434681 0.249129704 0.251630517 0.256514175 0.257178188 0.258246664 0.262452547 0.271564132 0.282855657 0.291945816 0.299835777 0.299973341 0.300982188 0.307041907 0.307771936 0.309779784 0.319816229 0.321326120 0.326326972 0.330058755 0.335618096 0.347706319 0.352003722 0.355594053 0.360416713 0.361594068 0.364082186 0.384405605 0.406786600 0.414345064 0.430210453 0.432574946 0.435272584 0.450775942 0.464598040 0.475338375 0.478809790 0.480314497 0.486657014 0.498892689 0.503836586 0.514374391 0.516860334 0.543761618 0.566908888 0.567660750 0.586537628 0.592088280 0.605659183 0.644140034 0.645323363 0.667949450 0.675583739 0.687361669 0.703557329 0.704340687 0.705720054 0.709281357 0.717115075 0.733878363 0.737971182 0.739237793 0.747858461 0.750754541 0.771607715 0.775964984 0.808644612 0.821702576 0.823891462 0.828907629 0.834008173 0.847104849 0.849280891 0.851385827 0.854503440 0.863277342 0.867469921 0.875441031 0.887410682 0.890950405 0.892143764 0.893362749 0.901001660 0.910225729 0.918005592 0.923436945 0.924476421 0.931791427 0.935490841 0.956023945 0.963559221 0.965098099 0.970040393 0.977192415 0.982376486 0.998600513 1.012724409 1.014936641 1.021169328 1.040029892 1.055039148 1.069585670 1.072388028 1.079384556 1.087308931 1.103612787 1.110265131 1.111624343 1.118753484 1.122516085 1.123534833 1.141839661 1.148719832 1.161738673 1.170032299 1.176644181 1.187195940 1.200738896 1.221198854 1.231594636 1.258095293 1.296389484 1.298071233 1.314673779 1.326457265 1.327063119 1.330140694 1.331342944 1.334703744 1.342087354 1.348603094 1.365354043 1.379951926 1.381279563 1.381744573 1.427889986 1.516452913 1.557960891 1.684715030 1.922754939</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">205</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90071091" y3="-0.95638712" z3="-0.70209284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.567642" y3="-1.95355617" z3="-1.59902057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05167222" y3="-0.99938345" z3="-1.45485511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75098473" y3="1.4749562" z3="-1.08927396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27329174" y3="0.31036849" z3="-0.51335087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63387907" y3="2.74251706" z3="-1.13038474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.98958311" y3="2.73476027" z3="-0.8537483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38079683" y3="4.99617063" z3="-0.33493325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.7968767" y3="3.85914351" z3="-0.8415692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76134935" y3="5.87261373" z3="-0.11976045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05264946" y3="1.62099583" z3="-1.64741469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12669971" y3="0.3618238" z3="0.22547712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.6979867" y3="0.38786185" z3="-0.60677058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60953562" y3="0.73012006" z3="0.3425471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63502587" y3="-0.84992271" z3="-1.47348221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10020658" y3="-2.47958972" z3="-1.29826503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.13631029" y3="-5.50989218" z3="-6.21967261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.84734909" y3="-5.07351695" z3="-5.25928053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.09337965" y3="-3.92776102" z3="-2.82063651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.80864403" y3="-3.69288085" z3="-5.11611711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.5362973" y3="-5.89804977" z3="-4.17507562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.17410453" y3="-5.31902144" z3="-2.96549711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.44032014" y3="-3.08799447" z3="-3.90357777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.05758232" y3="-3.02713723" z3="-5.94616297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.59008516" y3="-6.98592382" z3="-4.26486305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.97108066" y3="-5.95073571" z3="-2.09656148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.67043477" y3="-3.37748665" z3="-1.58375886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33327772" y3="-3.86470485" z3="-0.846715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6693234" y3="-4.86897525" z3="-1.11763114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38520165" y3="-3.56063203" z3="0.60056901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43877937" y3="-3.08520193" z3="3.35857979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69665785" y3="-4.59610573" z3="1.49064136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.12061935" y3="-2.28286842" z3="1.10268358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14446196" y3="-2.04723501" z3="2.47290313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71461011" y3="-4.36042637" z3="2.86404974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88304377" y3="-5.60441136" z3="1.1097094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09298946" y3="-1.4434341" z3="0.4402078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0760775" y3="-1.03810411" z3="2.83218554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92298418" y3="-5.18513093" z3="3.55091016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4465625" y3="-2.90391722" z3="4.4373115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.39192502" y3="-1.75237368" z3="-3.87954173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.49340076" y3="-1.34091495" z3="-2.97589417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32363872" y3="3.72743659" z3="-0.97764605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1178936" y3="-3.00845845" z3="-1.7240981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91406676" y3="-3.16753416" z3="-0.58621149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11402415" y3="-2.27701051" z3="0.3293881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83360377" y3="-0.70319182" z3="0.56007187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.61418439" y3="-0.19858897" z3="-1.0578421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53180303" y3="0.43634563" z3="1.22477204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14968111" y3="-1.03502662" z3="1.84813877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4014962" y3="-4.37407893" z3="-0.33558892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12484194" y3="-4.59393138" z3="0.86592101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.88110676" y3="0.16245114" z3="-1.79614606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.32587195" y3="0.62738137" z3="-0.87482947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.17676105" y3="-1.03431667" z3="-1.51234713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62250803" y3="0.54079669" z3="0.60670435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20929065" y3="0.0975693" z3="2.22499961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98838334" y3="1.43758644" z3="1.3353592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.61351796" y3="-0.08257556" z3="2.16128633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.95368562" y3="-1.68721603" z3="1.4616268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.71521534" y3="-1.51035015" z3="2.74468571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05883439" y3="-4.0085072" z3="0.87082591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51606953" y3="-4.32971245" z3="1.74434359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35929499" y3="-5.6666386" z3="0.8741664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27405999" y3="-2.19731047" z3="-0.17607505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13949952" y3="-3.30748607" z3="-1.02256147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50469962" y3="-4.4659323" z3="-0.59094716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00604918" y3="-4.50846686" z3="0.70539229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14853942" y3="-3.43812673" z3="1.58346426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7772189" y3="-2.28369793" z3="1.13458765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49419307" y3="-3.24764852" z3="-2.05477602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.37063351" y3="-5.3164631" z3="-1.25998983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27118125" y3="-5.69397169" z3="1.1482847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74218257" y3="-3.50894978" z3="2.59346246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86701349" y3="-1.42876059" z3="1.80573105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48750076" y3="4.01626843" z3="0.1274331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86116348" y3="3.81856034" z3="0.07845024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.42163446" y3="3.3350087" z3="-1.09900796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64934235" y3="3.06896092" z3="-2.22693277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27531799" y3="3.26057137" z3="-2.15693178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02431279" y3="4.3534262" z3="1.05881799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49590314" y3="4.01483502" z3="0.94249872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.86152667" y3="3.06928802" z3="-1.1446348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.12628173" y3="2.70330382" z3="-3.13707427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.34469825" y3="3.02720733" z3="-3.0249796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17523595" y3="-5.8919466" z3="2.33843986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.78116281" y3="-6.40712846" z3="0.29172214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36722988" y3="2.85955371" z3="-2.22653735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46974556" y3="3.05534185" z3="-0.09061558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5784523" y3="0.15845943" z3="-2.08330589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.90686748" y3="1.40628487" z3="-1.93330767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.73993729" y3="0.08402233" z3="-2.90090105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.20234467" y3="1.18919745" z3="-3.57123186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.25241638" y3="-0.87811481" z3="-2.99697607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.09266407" y3="1.11945718" z3="-4.20234296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.39415378" y3="2.52511103" z3="-2.6654153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.51044984" y3="2.41932056" z3="-3.4598629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.86490422" y3="3.47788095" z3="-2.59858479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.86348489" y3="3.29208251" z3="-4.01644153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57993575" y3="3.90066119" z3="-0.26339953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76875184" y3="5.05281997" z3="-0.04430032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93968199" y3="3.94801843" z3="0.15566449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47255971" y3="5.0887545" z3="0.70639634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56492469" y3="3.06014577" z3="0.04234352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.52021004" y3="5.09892054" z3="1.02124955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.35211466" y3="6.2230616" z3="0.5157668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67656296" y3="6.24722374" z3="0.87728179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7196778" y3="7.10412569" z3="0.66535447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.11406818" y3="7.15099416" z3="1.3105765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32459348" y3="-3.97307978" z3="-2.87494578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51564674" y3="-5.00262144" z3="-2.53472751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.18761972" y3="-3.65523218" z3="-3.49014428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44070072" y3="-3.98164802" z3="-3.53238222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67536521" y3="-1.62643685" z3="-2.12210088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40724992" y3="-1.15987129" z3="-2.80613328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51512067" y3="-0.95423083" z3="-1.26420572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7224651" y3="-1.67716269" z3="-2.67263211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9007,-.9564,-.7021;6.5676,-1.9536,-1.599;6.0517,-.9994,-1.4549;4.751,1.475,-1.0893;4.2733,.3104,-.5134;2.6339,2.7425,-1.1304;3.9896,2.7348,-.8537;2.3808,4.9962,-.3349;1.7969,3.8591,-.8416;1.7613,5.8726,-.1198;2.0526,1.621,-1.6474;3.1267,.3618,.2255;1.698,.3879,-.6068;.6095,.7301,.3425;1.635,-.8499,-1.4735;1.1002,-2.4796,-1.2983;2.1363,-5.5099,-6.2197;1.8473,-5.0735,-5.2593;1.0934,-3.9278,-2.8206;1.8086,-3.6929,-5.1161;1.5363,-5.898,-4.1751;1.1741,-5.319,-2.9655;1.4403,-3.088,-3.9036;2.0576,-3.0271,-5.9462;1.5901,-6.9859,-4.2649;.9711,-5.9507,-2.0966;.6704,-3.3775,-1.5838;-.3333,-3.8647,-.8467;-.6693,-4.869,-1.1176;-.3852,-3.5606,.6006;-.4388,-3.0852,3.3586;-.6967,-4.5961,1.4906;-.1206,-2.2829,1.1027;-.1445,-2.0472,2.4729;-.7146,-4.3604,2.864;-.883,-5.6044,1.1097;.093,-1.4434,.4402;.0761,-1.0381,2.8322;-.923,-5.1851,3.5509;-.4466,-2.9039,4.4373;1.3919,-1.7524,-3.8795;1.4934,-1.3409,-2.9759;.3236,3.7274,-.9776;-2.1179,-3.0085,-1.7241;-2.9141,-3.1675,-.5862;-3.114,-2.277,.3294;-3.8336,-.7032,.5601;-4.6142,-.1986,-1.0578;-2.5318,.4363,1.2248;-5.1497,-1.035,1.8481;-3.4015,-4.3741,-.3356;-4.1248,-4.5939,.8659;-3.8811,.1625,-1.7961;-5.3259,.6274,-.8748;-5.1768,-1.0343,-1.5123;-1.6225,.5408,.6067;-2.2093,.0976,2.225;-2.9884,1.4376,1.3354;-5.6135,-.0826,2.1613;-5.9537,-1.6872,1.4616;-4.7152,-1.5104,2.7447;-5.0588,-4.0085,.8708;-3.5161,-4.3297,1.7443;-4.3593,-5.6666,.8742;4.2741,-2.1973,-.1761;4.1395,-3.3075,-1.0226;3.5047,-4.4659,-.5909;3.006,-4.5085,.7054;3.1485,-3.4381,1.5835;3.7772,-2.2837,1.1346;4.4942,-3.2476,-2.0548;3.3706,-5.3165,-1.26;2.2712,-5.694,1.1483;2.7422,-3.5089,2.5935;3.867,-1.4288,1.8057;-.4875,4.0163,.1274;-1.8612,3.8186,.0785;-2.4216,3.335,-1.099;-1.6493,3.069,-2.2269;-.2753,3.2606,-2.1569;-.0243,4.3534,1.0588;-2.4959,4.0148,.9425;-3.8615,3.0693,-1.1446;-2.1263,2.7033,-3.1371;.3447,3.0272,-3.025;2.1752,-5.8919,2.3384;1.7812,-6.4071,.2917;-4.3672,2.8596,-2.2265;-4.4697,3.0553,-.0906;6.5785,.1585,-2.0833;5.9069,1.4063,-1.9333;7.7399,.084,-2.9009;8.2023,1.1892,-3.5712;8.2524,-.8781,-2.997;9.0927,1.1195,-4.2023;6.3942,2.5251,-2.6654;7.5104,2.4193,-3.4599;5.8649,3.4779,-2.5986;7.8635,3.2921,-4.0164;4.5799,3.9007,-.2634;3.7688,5.0528,-.0443;5.9397,3.948,.1557;6.4726,5.0888,.7064;6.5649,3.0601,.0423;7.5202,5.0989,1.0212;4.3521,6.2231,.5158;5.6766,6.2472,.8773;3.7197,7.1041,.6654;6.1141,7.151,1.3106;-2.3246,-3.9731,-2.8749;-2.5156,-5.0026,-2.5347;-3.1876,-3.6552,-3.4901;-1.4407,-3.9816,-3.5324;-1.6754,-1.6264,-2.1221;-2.4072,-1.1599,-2.8061;-1.5151,-.9542,-1.2642;-.7225,-1.6772,-2.6726;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662883090425</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001415714869 0.000262128807 0.025276880007 0.005340500293</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057052035 -0.000364735 0.000070002 0.000336303 0.000380575 0.000402269 0.000466797 0.000518908 0.000638459 0.000716763 0.000890511 0.000955159 0.001143242 0.001191840 0.001341292 0.001401735 0.001474104 0.001625255 0.002215371 0.002367446 0.002464130 0.002608375 0.002832923 0.003466251 0.003566996 0.003866868 0.004320129 0.004650228 0.004794498 0.004944773 0.005210037 0.005295779 0.006243162 0.006301859 0.006811018 0.006942415 0.007181663 0.007456821 0.008174823 0.008624767 0.008895677 0.009385987 0.009730020 0.010364356 0.011089972 0.011322535 0.011734483 0.012512102 0.013258240 0.013666740 0.013968729 0.014585432 0.014923734 0.015472981 0.015780147 0.016588891 0.017121033 0.018555095 0.018847577 0.019419504 0.020337806 0.020598713 0.021282971 0.021865763 0.022326672 0.022761875 0.023390459 0.023866936 0.024502547 0.025856712 0.026559097 0.026918959 0.027206655 0.027595797 0.028178642 0.029082528 0.030847864 0.031499684 0.032966176 0.034065395 0.034628839 0.035901258 0.039015015 0.039470163 0.041934051 0.045384688 0.046068321 0.046899920 0.048675919 0.049663344 0.049825033 0.050719577 0.051533984 0.052154840 0.052285286 0.052399122 0.052727943 0.053374452 0.054919439 0.056009238 0.056366118 0.056698770 0.056988381 0.057253587 0.057733001 0.058568754 0.059217159 0.059681488 0.061025493 0.062019632 0.062762084 0.064216684 0.064528815 0.064981273 0.065961028 0.067424372 0.067915685 0.068920098 0.070516918 0.072051081 0.072591747 0.072884494 0.073358569 0.075563473 0.078553415 0.080811143 0.081536175 0.083331272 0.084615901 0.088408989 0.088915518 0.089354220 0.089843749 0.091300838 0.093307427 0.094575221 0.095474835 0.096181758 0.096829568 0.098401333 0.100109311 0.100605925 0.102619334 0.103709001 0.104143327 0.106333478 0.108758240 0.110753554 0.112194529 0.112805542 0.113694347 0.114648452 0.116881365 0.117137847 0.118523450 0.119223863 0.120560026 0.121899069 0.125133606 0.125589685 0.128466927 0.128939894 0.130865147 0.133529964 0.136283178 0.137705128 0.138630337 0.139612637 0.140326470 0.143417579 0.144544608 0.145812122 0.146747258 0.151861990 0.153569114 0.154264578 0.160618150 0.161361661 0.168463689 0.171383229 0.175880917 0.178858177 0.181473027 0.184099762 0.188892600 0.189797391 0.191784151 0.201202531 0.202169441 0.206272123 0.206912733 0.207235557 0.212163858 0.212519919 0.213525187 0.216587797 0.218383550 0.220435215 0.220965515 0.224495642 0.225425078 0.231845251 0.234535549 0.235384081 0.238394063 0.246436355 0.249154851 0.251633353 0.256515033 0.257178406 0.258248848 0.262453708 0.271564259 0.282857475 0.291965664 0.299835894 0.299974981 0.300982446 0.307047281 0.307772214 0.309783778 0.319816153 0.321326633 0.326331172 0.330061751 0.335663485 0.347713863 0.352011614 0.355594122 0.360417450 0.361597230 0.364082217 0.384427236 0.406791323 0.414351351 0.430211102 0.432575079 0.435272531 0.450776257 0.464598687 0.475366849 0.478810420 0.480317282 0.486660890 0.498892947 0.503837100 0.514381172 0.516888151 0.543764487 0.566909123 0.567661103 0.586537769 0.592089630 0.605659489 0.644141023 0.645326163 0.667950091 0.675585928 0.687362818 0.703558080 0.704340692 0.705720729 0.709291072 0.717115144 0.733901077 0.737972270 0.739318471 0.747864366 0.750754632 0.771608014 0.775965105 0.808655358 0.821712224 0.823891624 0.828908687 0.834019929 0.847108394 0.849283886 0.851389449 0.854503458 0.863277614 0.867470071 0.875472314 0.887418777 0.890966907 0.892273956 0.893393839 0.901010691 0.910258111 0.918037973 0.923583699 0.924499924 0.931792818 0.935493505 0.956025527 0.963580226 0.965115554 0.970051190 0.977371912 0.982376834 0.998606421 1.012757022 1.014961524 1.021176325 1.040032468 1.055039969 1.069600062 1.072388094 1.079388429 1.087309199 1.103712609 1.110265859 1.111634149 1.118756520 1.122519032 1.123541397 1.141845956 1.148719960 1.161739653 1.170033117 1.176654609 1.187197303 1.200739870 1.221199768 1.231617979 1.258096334 1.296389897 1.298073890 1.314674966 1.326458362 1.327075103 1.330171930 1.331343826 1.334703937 1.342088554 1.348609445 1.365356180 1.379953628 1.381280093 1.381770403 1.428018422 1.516551117 1.557964266 1.684715136 1.922848198</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">206</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90238266" y3="-0.95590761" z3="-0.7001251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57121802" y3="-1.95351088" z3="-1.592932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05514287" y3="-0.99920165" z3="-1.45006097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75387549" y3="1.47539359" z3="-1.08755665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27479872" y3="0.3108987" z3="-0.51252798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63699165" y3="2.74285963" z3="-1.13385173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9920185" y3="2.73541226" z3="-0.85400394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38159997" y3="4.99632736" z3="-0.33998299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.79882097" y3="3.85912081" z3="-0.84759461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76144745" y3="5.87255354" z3="-0.12617479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.05783549" y3="1.6206654" z3="-1.6516092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12694592" y3="0.36236686" z3="0.2244096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.69915172" y3="0.38987712" z3="-0.61012986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60962845" y3="0.73601512" z3="0.33639014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.63565648" y3="-0.84912053" z3="-1.47531315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09898664" y3="-2.47785286" z3="-1.30121287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.12446077" y3="-5.50778891" z3="-6.22548747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.83782853" y3="-5.07152266" z3="-5.26434053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08951179" y3="-3.92601189" z3="-2.82383927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.79949882" y3="-3.6909162" z3="-5.12096472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52944507" y3="-5.8961434" z3="-4.17943767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16999452" y3="-5.31722746" z3="-2.96894679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.43409783" y3="-3.08616862" z3="-3.9074797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.04635653" y3="-3.0251012" z3="-5.9515949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5830858" y3="-6.98399895" z3="-4.26942405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96878991" y3="-5.94895392" z3="-2.0995798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66852893" y3="-3.37579521" z3="-1.58626615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33452132" y3="-3.86311441" z3="-0.84802034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67151796" y3="-4.8669319" z3="-1.11908781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38483068" y3="-3.55948862" z3="0.59931484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43758308" y3="-3.08238918" z3="3.35703966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69666404" y3="-4.59438901" z3="1.48959164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1192342" y3="-2.28170454" z3="1.10109647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14222058" y3="-2.04536518" z3="2.47130326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71418758" y3="-4.35789244" z3="2.86297943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88341309" y3="-5.60299008" z3="1.10908399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09455981" y3="-1.4429342" z3="0.43795473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08020971" y3="-1.03726319" z3="2.83073411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92327302" y3="-5.18191453" z3="3.5500661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44456107" y3="-2.90087975" z3="4.43579156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.38569649" y3="-1.75057365" z3="-3.88316464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48944116" y3="-1.3392046" z3="-2.9793958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32559017" y3="3.72670362" z3="-0.98585047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1194984" y3="-3.00512604" z3="-1.722587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91473776" y3="-3.16757526" z3="-0.58437178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11472791" y3="-2.27938873" z3="0.33357161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83482282" y3="-0.70728079" z3="0.56792688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.62552153" y3="-0.20550598" z3="-1.04728076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53247739" y3="0.43725013" z3="1.22319495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.14264431" y3="-1.03986286" z3="1.86519743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40102572" y3="-4.37530116" z3="-0.3363773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12470391" y3="-4.59808909" z3="0.86443004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.89667613" y3="0.15057258" z3="-1.79244036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.33105788" y3="0.62458651" z3="-0.86266393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.19564508" y3="-1.04029375" z3="-1.49410376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62328922" y3="0.54241852" z3="0.60080701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.20318763" y3="0.1026614" z3="2.22239135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99041686" y3="1.43709739" z3="1.33451895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.60730663" y3="-0.08765456" z3="2.18009535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.94713241" y3="-1.69427904" z3="1.48690368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.70127142" y3="-1.5126325" z3="2.76139116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05956961" y3="-4.01411311" z3="0.86912184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51726345" y3="-4.33388687" z3="1.74388941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35733839" y3="-5.6713813" z3="0.87110929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27411688" y3="-2.1966578" z3="-0.17572079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1382979" y3="-3.3054952" z3="-1.02359905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50250948" y3="-4.46393687" z3="-0.59324859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00456603" y3="-4.50789244" z3="0.70330463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14808914" y3="-3.43875378" z3="1.58259519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77724643" y3="-2.28403319" z3="1.13481369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49297852" y3="-3.24448209" z3="-2.05572886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36706267" y3="-5.31306939" z3="-1.26339218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26954501" y3="-5.6938041" z3="1.1453418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74194758" y3="-3.51059164" z3="2.59260166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86722982" y3="-1.42922063" z3="1.80648269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48737415" y3="4.01556532" z3="0.11884087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86082569" y3="3.81592458" z3="0.06785345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41846991" y3="3.32799168" z3="-1.10856667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64421898" y3="3.06092019" z3="-2.23503166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.27079065" y3="3.25571192" z3="-2.16406836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02770482" y3="4.35765192" z3="1.0483063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49635949" y3="4.01116325" z3="0.93299125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8579429" y3="3.05940504" z3="-1.15599995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11947941" y3="2.6921074" z3="-3.14489591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35138865" y3="3.02004125" z3="-3.02837501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1736802" y3="-5.89266578" z3="2.3354296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77961794" y3="-6.40662675" z3="0.28837021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.36030874" y3="2.83970173" z3="-2.23670782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46861269" y3="3.05245724" z3="-0.10355179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58372301" y3="0.15859098" z3="-2.07706268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91173615" y3="1.4064669" z3="-1.92894569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.7475419" y3="0.08407" z3="-2.89129851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2119141" y3="1.18919858" z3="-3.56031433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.26033028" y3="-0.8780642" z3="-2.98573015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.10417741" y3="1.11948756" z3="-4.18860091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4008998" y3="2.52506711" z3="-2.66018248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.51952805" y3="2.41922352" z3="-3.45131512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87129613" y3="3.47770184" z3="-2.59551886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.87410669" y3="3.29188631" z3="-4.00706101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5809888" y3="3.90164815" z3="-0.26286467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76900778" y3="5.05335319" z3="-0.04667901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93946623" y3="3.95002436" z3="0.15935763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.47008219" y3="5.09129673" z3="0.71110875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56539232" y3="3.06261926" z3="0.04801883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51638321" y3="5.10255617" z3="1.02877838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3506119" y3="6.2240833" z3="0.51369023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67344592" y3="6.24928355" z3="0.8789182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71759865" y3="7.10444395" z3="0.65989172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10938481" y3="7.15346056" z3="1.31274605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.32689239" y3="-3.96635475" z3="-2.87589955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51684199" y3="-4.99680375" z3="-2.53944135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19115175" y3="-3.64745835" z3="-3.48883359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44411806" y3="-3.97195267" z3="-3.5349633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67745739" y3="-1.62206786" z3="-2.11713385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.40938482" y3="-1.15435957" z3="-2.80006067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51805957" y3="-0.95155223" z3="-1.25763188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72451071" y3="-1.67074624" z3="-2.6675798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9024,-.9559,-.7001;6.5712,-1.9535,-1.5929;6.0551,-.9992,-1.4501;4.7539,1.4754,-1.0876;4.2748,.3109,-.5125;2.637,2.7429,-1.1339;3.992,2.7354,-.854;2.3816,4.9963,-.34;1.7988,3.8591,-.8476;1.7614,5.8726,-.1262;2.0578,1.6207,-1.6516;3.1269,.3624,.2244;1.6992,.3899,-.6101;.6096,.736,.3364;1.6357,-.8491,-1.4753;1.099,-2.4779,-1.3012;2.1245,-5.5078,-6.2255;1.8378,-5.0715,-5.2643;1.0895,-3.926,-2.8238;1.7995,-3.6909,-5.121;1.5294,-5.8961,-4.1794;1.17,-5.3172,-2.9689;1.4341,-3.0862,-3.9075;2.0464,-3.0251,-5.9516;1.5831,-6.984,-4.2694;.9688,-5.949,-2.0996;.6685,-3.3758,-1.5863;-.3345,-3.8631,-.848;-.6715,-4.8669,-1.1191;-.3848,-3.5595,.5993;-.4376,-3.0824,3.357;-.6967,-4.5944,1.4896;-.1192,-2.2817,1.1011;-.1422,-2.0454,2.4713;-.7142,-4.3579,2.863;-.8834,-5.603,1.1091;.0946,-1.4429,.438;.0802,-1.0373,2.8307;-.9233,-5.1819,3.5501;-.4446,-2.9009,4.4358;1.3857,-1.7506,-3.8832;1.4894,-1.3392,-2.9794;.3256,3.7267,-.9859;-2.1195,-3.0051,-1.7226;-2.9147,-3.1676,-.5844;-3.1147,-2.2794,.3336;-3.8348,-.7073,.5679;-4.6255,-.2055,-1.0473;-2.5325,.4373,1.2232;-5.1426,-1.0399,1.8652;-3.401,-4.3753,-.3364;-4.1247,-4.5981,.8644;-3.8967,.1506,-1.7924;-5.3311,.6246,-.8627;-5.1956,-1.0403,-1.4941;-1.6233,.5424,.6008;-2.2032,.1027,2.2224;-2.9904,1.4371,1.3345;-5.6073,-.0877,2.1801;-5.9471,-1.6943,1.4869;-4.7013,-1.5126,2.7614;-5.0596,-4.0141,.8691;-3.5173,-4.3339,1.7439;-4.3573,-5.6714,.8711;4.2741,-2.1967,-.1757;4.1383,-3.3055,-1.0236;3.5025,-4.4639,-.5932;3.0046,-4.5079,.7033;3.1481,-3.4388,1.5826;3.7772,-2.284,1.1348;4.493,-3.2445,-2.0557;3.3671,-5.3131,-1.2634;2.2695,-5.6938,1.1453;2.7419,-3.5106,2.5926;3.8672,-1.4292,1.8065;-.4874,4.0156,.1188;-1.8608,3.8159,.0679;-2.4185,3.328,-1.1086;-1.6442,3.0609,-2.235;-.2708,3.2557,-2.1641;-.0277,4.3577,1.0483;-2.4964,4.0112,.933;-3.8579,3.0594,-1.156;-2.1195,2.6921,-3.1449;.3514,3.02,-3.0284;2.1737,-5.8927,2.3354;1.7796,-6.4066,.2884;-4.3603,2.8397,-2.2367;-4.4686,3.0525,-.1036;6.5837,.1586,-2.0771;5.9117,1.4065,-1.9289;7.7475,.0841,-2.8913;8.2119,1.1892,-3.5603;8.2603,-.8781,-2.9857;9.1042,1.1195,-4.1886;6.4009,2.5251,-2.6602;7.5195,2.4192,-3.4513;5.8713,3.4777,-2.5955;7.8741,3.2919,-4.0071;4.581,3.9016,-.2629;3.769,5.0534,-.0467;5.9395,3.95,.1594;6.4701,5.0913,.7111;6.5654,3.0626,.048;7.5164,5.1026,1.0288;4.3506,6.2241,.5137;5.6734,6.2493,.8789;3.7176,7.1044,.6599;6.1094,7.1535,1.3127;-2.3269,-3.9664,-2.8759;-2.5168,-4.9968,-2.5394;-3.1912,-3.6475,-3.4888;-1.4441,-3.972,-3.535;-1.6775,-1.6221,-2.1171;-2.4094,-1.1544,-2.8001;-1.5181,-.9516,-1.2576;-.7245,-1.6707,-2.6676;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662892993001</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001730469774 0.000241955502 0.021169163879 0.005334242123</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057052384 -0.000322708 0.000072041 0.000337112 0.000381472 0.000404909 0.000466716 0.000518869 0.000638395 0.000716771 0.000890686 0.000957344 0.001143275 0.001192065 0.001341745 0.001401641 0.001479443 0.001634843 0.002217139 0.002368348 0.002464521 0.002608473 0.002833337 0.003473596 0.003575046 0.003873285 0.004326361 0.004654653 0.004795542 0.004944400 0.005209949 0.005308689 0.006243352 0.006306544 0.006813942 0.006942719 0.007188846 0.007457396 0.008175006 0.008643003 0.008898555 0.009394028 0.009730123 0.010364960 0.011093286 0.011329442 0.011744353 0.012512944 0.013258162 0.013671568 0.013968591 0.014585834 0.014924062 0.015474151 0.015782481 0.016591557 0.017130062 0.018556120 0.018847979 0.019419747 0.020338374 0.020607244 0.021299737 0.021865739 0.022341844 0.022763930 0.023390529 0.023867156 0.024502825 0.025859681 0.026562215 0.026919074 0.027223602 0.027596509 0.028183928 0.029083001 0.030848265 0.031504106 0.032972076 0.034065732 0.034628864 0.035903458 0.039015712 0.039470404 0.041934439 0.045384808 0.046083224 0.046926044 0.048681648 0.049667058 0.049828916 0.050720124 0.051534000 0.052156903 0.052285276 0.052399916 0.052728217 0.053383003 0.054921087 0.056012571 0.056367204 0.056698795 0.056990029 0.057266145 0.057739883 0.058570968 0.059217931 0.059682472 0.061042579 0.062020114 0.062762280 0.064216684 0.064530013 0.064982205 0.065963905 0.067425428 0.067915820 0.068920248 0.070516987 0.072051227 0.072593682 0.072886693 0.073366578 0.075563526 0.078553832 0.080813685 0.081536251 0.083331626 0.084633455 0.088425821 0.088918263 0.089355800 0.089843636 0.091301286 0.093308429 0.094575273 0.095474851 0.096181708 0.096829637 0.098402431 0.100112455 0.100607562 0.102619468 0.103715521 0.104149085 0.106333759 0.108763001 0.110764200 0.112194528 0.112805785 0.113697011 0.114649405 0.116881916 0.117139440 0.118524125 0.119230389 0.120561196 0.121899521 0.125154056 0.125591826 0.128468387 0.128940621 0.130873561 0.133530093 0.136284267 0.137705280 0.138634582 0.139612669 0.140327318 0.143420199 0.144557730 0.145841246 0.146748201 0.151874386 0.153582406 0.154283125 0.160631989 0.161397890 0.168464483 0.171387277 0.175881128 0.178864878 0.181475447 0.184098794 0.188901131 0.189797883 0.191784135 0.201206618 0.202169468 0.206273559 0.206912848 0.207236398 0.212164491 0.212522818 0.213566556 0.216590364 0.218463873 0.220439707 0.220972141 0.224504483 0.225425201 0.231845256 0.234535580 0.235384187 0.238395454 0.246436597 0.249163590 0.251635115 0.256515008 0.257178825 0.258250417 0.262455120 0.271564442 0.282858274 0.291977287 0.299836354 0.299978922 0.300982442 0.307051885 0.307772554 0.309787788 0.319816365 0.321326712 0.326336163 0.330068691 0.335712786 0.347715910 0.352016351 0.355594436 0.360422806 0.361601039 0.364082451 0.384442164 0.406797698 0.414361686 0.430215628 0.432579030 0.435273077 0.450777154 0.464599187 0.475388007 0.478811011 0.480320687 0.486662905 0.498893201 0.503840397 0.514387293 0.516914852 0.543767099 0.566909124 0.567661414 0.586537781 0.592103191 0.605660036 0.644147193 0.645328290 0.667951975 0.675586312 0.687363283 0.703558310 0.704340828 0.705724828 0.709302391 0.717115473 0.733918758 0.737972494 0.739370273 0.747867983 0.750754762 0.771608311 0.775965136 0.808669634 0.821722594 0.823891623 0.828909841 0.834033043 0.847112960 0.849286073 0.851392390 0.854503479 0.863277680 0.867470243 0.875500972 0.887419600 0.890971308 0.892314769 0.893401109 0.901025356 0.910272078 0.918090450 0.923700890 0.924524089 0.931793317 0.935496231 0.956027540 0.963586379 0.965130527 0.970060836 0.977607779 0.982377551 0.998610828 1.012770967 1.014990051 1.021182622 1.040037763 1.055040088 1.069628611 1.072389061 1.079392000 1.087309237 1.103859475 1.110268329 1.111656723 1.118759100 1.122519691 1.123544024 1.141849256 1.148720153 1.161740754 1.170034064 1.176665450 1.187198465 1.200740755 1.221200810 1.231646801 1.258096851 1.296390028 1.298074454 1.314675198 1.326459984 1.327084223 1.330180782 1.331346188 1.334704207 1.342090873 1.348623284 1.365368462 1.379954096 1.381281128 1.381777168 1.428137641 1.516555547 1.557968513 1.684715229 1.922868943</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">207</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90424553" y3="-0.95602271" z3="-0.69707528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57432847" y3="-1.95368736" z3="-1.58751698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.05840713" y3="-0.99923689" z3="-1.44484402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.75686415" y3="1.47558312" z3="-1.08341775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.276512" y3="0.31080401" z3="-0.50999343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.63957397" y3="2.74208002" z3="-1.13536802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9939341" y3="2.73529528" z3="-0.85223956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38233273" y3="4.99695021" z3="-0.3468709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80083796" y3="3.85859491" z3="-0.85282065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76186454" y3="5.87340243" z3="-0.13739187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06132935" y3="1.61970973" z3="-1.65384226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12695015" y3="0.3617328" z3="0.22428718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70148356" y3="0.38773855" z3="-0.61364801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60936121" y3="0.73149593" z3="0.33103644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64147283" y3="-0.85065552" z3="-1.47988427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09870835" y3="-2.47731561" z3="-1.30340133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.11239654" y3="-5.50422044" z3="-6.23163517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.82805203" y3="-5.0682808" z3="-5.26967957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.08529146" y3="-3.92374801" z3="-2.8271698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.78955233" y3="-3.68768827" z3="-5.12589964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.52277117" y3="-5.89329994" z3="-4.18424248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.16607073" y3="-5.31488784" z3="-2.97270983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42692896" y3="-3.08347331" z3="-3.91138541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.03412408" y3="-3.02161433" z3="-5.95697268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.57659208" y3="-6.98109779" z3="-4.27471401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96699929" y3="-5.94686221" z3="-2.10304327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66627867" y3="-3.37392748" z3="-1.58874537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33639199" y3="-3.86065236" z3="-0.8497004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67376482" y3="-4.86465893" z3="-1.1200897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38472882" y3="-3.55674636" z3="0.59780659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43394756" y3="-3.0804051" z3="3.35580033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69557194" y3="-4.59172389" z3="1.48861246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11848537" y3="-2.27901382" z3="1.09918848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14019661" y3="-2.04286705" z3="2.46935843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71142591" y3="-4.35563353" z3="2.86200582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8833904" y3="-5.59985978" z3="1.10812438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0941057" y3="-1.4396618" z3="0.4361575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0819214" y3="-1.03399687" z3="2.82822341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91945356" y3="-5.17998248" z3="3.54942853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44010974" y3="-2.89870322" z3="4.43448241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37774716" y3="-1.74786407" z3="-3.88618366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48683371" y3="-1.33774674" z3="-2.98278828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32813234" y3="3.72468347" z3="-0.99286889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12154344" y3="-3.00248001" z3="-1.72133887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91572621" y3="-3.16724909" z3="-0.58269099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11468341" y3="-2.28135083" z3="0.33768328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83654996" y3="-0.7093683" z3="0.57440139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6385404" y3="-0.21408235" z3="-1.03551998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53199967" y3="0.43898567" z3="1.21944269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.13345482" y3="-1.04288516" z3="1.88128458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40150185" y3="-4.37552141" z3="-0.33653995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12377875" y3="-4.60119749" z3="0.86479219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.91402647" y3="0.13520436" z3="-1.78774438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34093988" y3="0.61925229" z3="-0.85067218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.21350219" y3="-1.05000518" z3="-1.47366303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62909691" y3="0.54451781" z3="0.59187037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1970091" y3="0.10691261" z3="2.21779014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99165293" y3="1.43894661" z3="1.32969949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5969359" y3="-0.0913015" z3="2.19871981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93994977" y3="-1.6992835" z3="1.50807284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.68415032" y3="-1.51414921" z3="2.77252892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05944306" y3="-4.01849845" z3="0.87152156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51551126" y3="-4.33765772" z3="1.74397283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35532158" y3="-5.67462315" z3="0.869896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27462254" y3="-2.19688352" z3="-0.1745962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13841037" y3="-3.3046473" z3="-1.02392915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.50138312" y3="-4.46295069" z3="-0.5953768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00297996" y3="-4.50796565" z3="0.70101454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14661055" y3="-3.43984476" z3="1.58161191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77674872" y3="-2.28516719" z3="1.13547296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49375393" y3="-3.24270675" z3="-2.0557963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3658174" y3="-5.31154843" z3="-1.26654749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26757456" y3="-5.69404559" z3="1.14147809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7399945" y3="-3.51255354" z3="2.5913736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86712819" y3="-1.43141868" z3="1.80815491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4864456" y3="4.01674307" z3="0.10871338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85936698" y3="3.81455298" z3="0.05811397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41579296" y3="3.32306053" z3="-1.11806815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.64026678" y3="3.05451094" z3="-2.24327502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26699728" y3="3.25125431" z3="-2.17137698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02627951" y3="4.35919198" z3="1.03974882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49670625" y3="4.01316187" z3="0.91961603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85451726" y3="3.05100683" z3="-1.16475452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.11389218" y3="2.68251862" z3="-3.15250932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.35520438" y3="3.01676642" z3="-3.03778303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17236057" y3="-5.89489609" z3="2.33122667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77653925" y3="-6.40487265" z3="0.2835491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.35535112" y3="2.82287139" z3="-2.24501386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46669905" y3="3.05061863" z3="-0.11302575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.58859429" y3="0.15885203" z3="-2.06995583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.91668122" y3="1.40690086" z3="-1.92226467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.75395317" y3="0.08433443" z3="-2.88212032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.21997438" y3="1.18966003" z3="-3.54968981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.26656581" y3="-0.87799604" z3="-2.97622458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.11336445" y3="1.11988725" z3="-4.17654861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.40776243" y3="2.52583293" z3="-2.65172956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.52784147" y3="2.41996997" z3="-3.44100157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.87853404" y3="3.47882854" z3="-2.58705571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88377563" y3="3.29287055" z3="-3.99552319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58097183" y3="3.90245652" z3="-0.26122603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76875261" y3="5.05473675" z3="-0.04970249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93804572" y3="3.95117272" z3="0.16544948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46770436" y3="5.09324558" z3="0.71640632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56363463" y3="3.06326972" z3="0.05817276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51309321" y3="5.10455711" z3="1.03758583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34915491" y3="6.22639522" z3="0.51010443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.67117646" y3="6.25180906" z3="0.87918501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71606667" y3="7.10752321" z3="0.65353563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10621145" y3="7.15666889" z3="1.31250713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3297549" y3="-3.96216097" z3="-2.87621718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51872607" y3="-4.99360566" z3="-2.54041676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19454524" y3="-3.64237404" z3="-3.48792556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.44745143" y3="-3.96678404" z3="-3.53586976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68030736" y3="-1.61858095" z3="-2.11454902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41280932" y3="-1.14995425" z3="-2.79638365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51987808" y3="-0.94938088" z3="-1.25453594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.72775528" y3="-1.66692668" z3="-2.66594323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9042,-.956,-.6971;6.5743,-1.9537,-1.5875;6.0584,-.9992,-1.4448;4.7569,1.4756,-1.0834;4.2765,.3108,-.51;2.6396,2.7421,-1.1354;3.9939,2.7353,-.8522;2.3823,4.997,-.3469;1.8008,3.8586,-.8528;1.7619,5.8734,-.1374;2.0613,1.6197,-1.6538;3.127,.3617,.2243;1.7015,.3877,-.6136;.6094,.7315,.331;1.6415,-.8507,-1.4799;1.0987,-2.4773,-1.3034;2.1124,-5.5042,-6.2316;1.8281,-5.0683,-5.2697;1.0853,-3.9237,-2.8272;1.7896,-3.6877,-5.1259;1.5228,-5.8933,-4.1842;1.1661,-5.3149,-2.9727;1.4269,-3.0835,-3.9114;2.0341,-3.0216,-5.957;1.5766,-6.9811,-4.2747;.967,-5.9469,-2.103;.6663,-3.3739,-1.5887;-.3364,-3.8607,-.8497;-.6738,-4.8647,-1.1201;-.3847,-3.5567,.5978;-.4339,-3.0804,3.3558;-.6956,-4.5917,1.4886;-.1185,-2.279,1.0992;-.1402,-2.0429,2.4694;-.7114,-4.3556,2.862;-.8834,-5.5999,1.1081;.0941,-1.4397,.4362;.0819,-1.034,2.8282;-.9195,-5.18,3.5494;-.4401,-2.8987,4.4345;1.3777,-1.7479,-3.8862;1.4868,-1.3377,-2.9828;.3281,3.7247,-.9929;-2.1215,-3.0025,-1.7213;-2.9157,-3.1672,-.5827;-3.1147,-2.2814,.3377;-3.8365,-.7094,.5744;-4.6385,-.2141,-1.0355;-2.532,.439,1.2194;-5.1335,-1.0429,1.8813;-3.4015,-4.3755,-.3365;-4.1238,-4.6012,.8648;-3.914,.1352,-1.7877;-5.3409,.6193,-.8507;-5.2135,-1.05,-1.4737;-1.6291,.5445,.5919;-2.197,.1069,2.2178;-2.9917,1.4389,1.3297;-5.5969,-.0913,2.1987;-5.9399,-1.6993,1.5081;-4.6842,-1.5141,2.7725;-5.0594,-4.0185,.8715;-3.5155,-4.3377,1.744;-4.3553,-5.6746,.8699;4.2746,-2.1969,-.1746;4.1384,-3.3046,-1.0239;3.5014,-4.463,-.5954;3.003,-4.508,.701;3.1466,-3.4398,1.5816;3.7767,-2.2852,1.1355;4.4938,-3.2427,-2.0558;3.3658,-5.3115,-1.2665;2.2676,-5.694,1.1415;2.74,-3.5126,2.5914;3.8671,-1.4314,1.8082;-.4864,4.0167,.1087;-1.8594,3.8146,.0581;-2.4158,3.3231,-1.1181;-1.6403,3.0545,-2.2433;-.267,3.2513,-2.1714;-.0263,4.3592,1.0397;-2.4967,4.0132,.9196;-3.8545,3.051,-1.1648;-2.1139,2.6825,-3.1525;.3552,3.0168,-3.0378;2.1724,-5.8949,2.3312;1.7765,-6.4049,.2835;-4.3554,2.8229,-2.245;-4.4667,3.0506,-.113;6.5886,.1589,-2.07;5.9167,1.4069,-1.9223;7.754,.0843,-2.8821;8.22,1.1897,-3.5497;8.2666,-.878,-2.9762;9.1134,1.1199,-4.1765;6.4078,2.5258,-2.6517;7.5278,2.42,-3.441;5.8785,3.4788,-2.5871;7.8838,3.2929,-3.9955;4.581,3.9025,-.2612;3.7688,5.0547,-.0497;5.938,3.9512,.1654;6.4677,5.0932,.7164;6.5636,3.0633,.0582;7.5131,5.1046,1.0376;4.3492,6.2264,.5101;5.6712,6.2518,.8792;3.7161,7.1075,.6535;6.1062,7.1567,1.3125;-2.3298,-3.9622,-2.8762;-2.5187,-4.9936,-2.5404;-3.1945,-3.6424,-3.4879;-1.4475,-3.9668,-3.5359;-1.6803,-1.6186,-2.1145;-2.4128,-1.15,-2.7964;-1.5199,-.9494,-1.2545;-.7278,-1.6669,-2.6659;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662900680452</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001612712112 0.000251777834 0.023368814152 0.005340901897</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057052569 -0.000371639 0.000072425 0.000337113 0.000382924 0.000409061 0.000466893 0.000519978 0.000638366 0.000716873 0.000890864 0.000964748 0.001144175 0.001192100 0.001342063 0.001401681 0.001492677 0.001674508 0.002224445 0.002368254 0.002464448 0.002610266 0.002834522 0.003475150 0.003577707 0.003878161 0.004334971 0.004657495 0.004797202 0.004948344 0.005209981 0.005321011 0.006243871 0.006315253 0.006818312 0.006944386 0.007194201 0.007460331 0.008175132 0.008661679 0.008903573 0.009399811 0.009730514 0.010367303 0.011094470 0.011338225 0.011751396 0.012512840 0.013258357 0.013674369 0.013968745 0.014586427 0.014923946 0.015474292 0.015782649 0.016592303 0.017136605 0.018557160 0.018847953 0.019421320 0.020338582 0.020616105 0.021319172 0.021866244 0.022350827 0.022764038 0.023390978 0.023866861 0.024502919 0.025863767 0.026564409 0.026919169 0.027236184 0.027596602 0.028187638 0.029084356 0.030849289 0.031506633 0.032975901 0.034065925 0.034629153 0.035907194 0.039016976 0.039472549 0.041934627 0.045384900 0.046085282 0.046941504 0.048687881 0.049670327 0.049834270 0.050720441 0.051534019 0.052159295 0.052285366 0.052399861 0.052728295 0.053394662 0.054921839 0.056015057 0.056367858 0.056699010 0.056991270 0.057272246 0.057745876 0.058572263 0.059219605 0.059682618 0.061061894 0.062020170 0.062763342 0.064216767 0.064530701 0.064982943 0.065965646 0.067426746 0.067915882 0.068920269 0.070516998 0.072051844 0.072596296 0.072889635 0.073372445 0.075563888 0.078554663 0.080815662 0.081536608 0.083331593 0.084645433 0.088439293 0.088928860 0.089357679 0.089844386 0.091302196 0.093309626 0.094575366 0.095475089 0.096181750 0.096830152 0.098403479 0.100113716 0.100608356 0.102619555 0.103718847 0.104153794 0.106333827 0.108763933 0.110766585 0.112194536 0.112805899 0.113698837 0.114655638 0.116882543 0.117139530 0.118530549 0.119233364 0.120562459 0.121906801 0.125165619 0.125592631 0.128468689 0.128941507 0.130876167 0.133530784 0.136286173 0.137705299 0.138638243 0.139612749 0.140328715 0.143428899 0.144574396 0.145864235 0.146748724 0.151882965 0.153586082 0.154291499 0.160661195 0.161426628 0.168464918 0.171387136 0.175881407 0.178865331 0.181475887 0.184114212 0.188908194 0.189798121 0.191784816 0.201212215 0.202169509 0.206274354 0.206915318 0.207238429 0.212168125 0.212525606 0.213636989 0.216593202 0.218557982 0.220446222 0.220974802 0.224514616 0.225425767 0.231845289 0.234535604 0.235384200 0.238398915 0.246437624 0.249186538 0.251637548 0.256515351 0.257179662 0.258251218 0.262456859 0.271564641 0.282858267 0.291982122 0.299836497 0.299986471 0.300982889 0.307056896 0.307772660 0.309790330 0.319818253 0.321326913 0.326342974 0.330072670 0.335767829 0.347716011 0.352018560 0.355596169 0.360427277 0.361603861 0.364083801 0.384458028 0.406810602 0.414367141 0.430222503 0.432586621 0.435273128 0.450777558 0.464599818 0.475405953 0.478811595 0.480324047 0.486662879 0.498893517 0.503848166 0.514401541 0.516935237 0.543771519 0.566909120 0.567662334 0.586537862 0.592113493 0.605661164 0.644147039 0.645329919 0.667953443 0.675586898 0.687363901 0.703558411 0.704340875 0.705725242 0.709303583 0.717115482 0.733937679 0.737973018 0.739436869 0.747871564 0.750754765 0.771608462 0.775965193 0.808681093 0.821735194 0.823891708 0.828910177 0.834052256 0.847116932 0.849289462 0.851392698 0.854503482 0.863277672 0.867470380 0.875529748 0.887419777 0.890975957 0.892346712 0.893403108 0.901039128 0.910290780 0.918122683 0.923828879 0.924562984 0.931793613 0.935498374 0.956028836 0.963602145 0.965138551 0.970063315 0.977729975 0.982378010 0.998613233 1.012777243 1.015021321 1.021189967 1.040044153 1.055040260 1.069678095 1.072389532 1.079395247 1.087309351 1.104043045 1.110273002 1.111697477 1.118760337 1.122519691 1.123544232 1.141850258 1.148721279 1.161741494 1.170034538 1.176672709 1.187199105 1.200741486 1.221200923 1.231674174 1.258096976 1.296391938 1.298074576 1.314678079 1.326462442 1.327098721 1.330181947 1.331350321 1.334704544 1.342091067 1.348630910 1.365377770 1.379954371 1.381281704 1.381777466 1.428260931 1.516579750 1.557971859 1.684715282 1.922903417</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">208</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90610312" y3="-0.9553098" z3="-0.69521058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.57864477" y3="-1.95323774" z3="-1.58044286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06236458" y3="-0.99874963" z3="-1.43957714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7594609" y3="1.47592922" z3="-1.08311849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2778535" y3="0.31145082" z3="-0.51010366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64215226" y3="2.7422777" z3="-1.14038778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99593671" y3="2.73580114" z3="-0.85425748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38161756" y3="4.9967684" z3="-0.3496091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80180777" y3="3.85847072" z3="-0.85859036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75985194" y3="5.87310924" z3="-0.13843641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06610207" y3="1.61921109" z3="-1.65960015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12683362" y3="0.3624803" z3="0.22194831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70264645" y3="0.38939189" z3="-0.61860145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6090488" y3="0.73641064" z3="0.3229328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64301039" y3="-0.85021624" z3="-1.48313965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09785026" y3="-2.47567322" z3="-1.30654674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.09858989" y3="-5.50300976" z3="-6.23774581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.81708472" y3="-5.0670592" z3="-5.274931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0813033" y3="-3.9224431" z3="-2.830257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7793716" y3="-3.68647429" z3="-5.13094818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.51468433" y3="-5.89202765" z3="-4.188644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1614047" y3="-5.3135624" z3="-2.9760799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.42031381" y3="-3.08222303" z3="-3.91536225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02171677" y3="-3.02039603" z3="-5.96268308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56802054" y3="-6.9798386" z3="-4.27929592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96426644" y3="-5.94546312" z3="-2.10590789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66490355" y3="-3.37274874" z3="-1.5908583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33716618" y3="-3.85893172" z3="-0.85062494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67546383" y3="-4.86261629" z3="-1.12075582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38403856" y3="-3.55487279" z3="0.59683117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43142242" y3="-3.07749556" z3="3.35465155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6947578" y3="-4.58942784" z3="1.48796399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1171645" y3="-2.27706042" z3="1.09779669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1373076" y3="-2.04071914" z3="2.46804451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70975031" y3="-4.35277175" z3="2.86132732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88258613" y3="-5.59809401" z3="1.10806736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0950726" y3="-1.43813377" z3="0.43427012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08610128" y3="-1.03246938" z3="2.82682738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91795237" y3="-5.17669152" z3="3.54894146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43622729" y3="-2.89588927" z3="4.43338729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37142081" y3="-1.74657878" z3="-3.89006952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48350762" y3="-1.3363334" z3="-2.98674308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.32921361" y3="3.72391007" z3="-1.00118642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1231284" y3="-2.99974454" z3="-1.71993054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91612414" y3="-3.16684217" z3="-0.58081231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11454617" y3="-2.28273398" z3="0.3414089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83669185" y3="-0.71294428" z3="0.58266941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.64819314" y3="-0.22055749" z3="-1.0247721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.532649" y3="0.44084498" z3="1.21917962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.12573681" y3="-1.04844031" z3="1.89760147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40138785" y3="-4.37570582" z3="-0.33707625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12411251" y3="-4.6037639" z3="0.86303984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.9276319" y3="0.12256969" z3="-1.78359196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34471473" y3="0.61677386" z3="-0.83858111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.23035946" y3="-1.05574586" z3="-1.45485592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63026199" y3="0.54739786" z3="0.58767863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.19132459" y3="0.11336492" z3="2.21676628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9943371" y3="1.43897822" z3="1.33008369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.58978799" y3="-0.0978581" z3="2.21765653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.93258371" y3="-1.70705217" z3="1.53144166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.66991819" y3="-1.51769931" z3="2.78832886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06028543" y3="-4.0217935" z3="0.86991877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51713184" y3="-4.34138721" z3="1.74312529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35446391" y3="-5.67748854" z3="0.86621776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27494505" y3="-2.19604723" z3="-0.17424637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1373298" y3="-3.30238036" z3="-1.02505401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49950584" y3="-4.46084397" z3="-0.59774199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00203159" y3="-4.50747301" z3="0.69892842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14680526" y3="-3.44063894" z3="1.58080703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77732922" y3="-2.28555915" z3="1.13575953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.492477" y3="-3.23912492" z3="-2.0568755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36255063" y3="-5.30811005" z3="-1.27000589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26634451" y3="-5.69385112" z3="1.13838939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74056486" y3="-3.51446449" z3="2.59062929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86815766" y3="-1.432227" z3="1.80921079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48720019" y3="4.01623318" z3="0.10016716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86011597" y3="3.81346141" z3="0.046365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41365244" y3="3.31733055" z3="-1.12855191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63600066" y3="3.04666343" z3="-2.25166557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.26338133" y3="3.24627591" z3="-2.17879257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03074105" y3="4.363926" z3="1.02904531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49815673" y3="4.0115567" z3="0.90906237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.85220962" y3="3.0434109" z3="-1.17768611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10810717" y3="2.67138353" z3="-3.16057196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36118245" y3="3.00805966" z3="-3.04029072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17133943" y3="-5.89583879" z3="2.3279961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77509634" y3="-6.40395187" z3="0.27995494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3499158" y3="2.80627135" z3="-2.25703445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46678163" y3="3.04975289" z3="-0.12743984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.5943853" y3="0.15924922" z3="-2.06331948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92163049" y3="1.40701629" z3="-1.91857415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76265481" y3="0.08500848" z3="-2.87103836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23084327" y3="1.19034577" z3="-3.53704718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.27593102" y3="-0.87705236" z3="-2.96277979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.12665311" y3="1.12090701" z3="-4.16018234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.41478124" y3="2.52571827" z3="-2.64699761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5378296" y3="2.42021984" z3="-3.4317278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.88491084" y3="3.47830076" z3="-2.5851759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.8954884" y3="3.29308386" z3="-3.98518364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58147453" y3="3.90307735" z3="-0.2616425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76775648" y3="5.05492528" z3="-0.05019983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93821202" y3="3.95238211" z3="0.16673994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46602722" y3="5.09462253" z3="0.71928868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56514299" y3="3.06486654" z3="0.05908873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51132647" y3="5.10641098" z3="1.04134452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34619028" y3="6.22670028" z3="0.51171426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66780619" y3="6.25275813" z3="0.88255777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71197226" y3="7.10726772" z3="0.65458152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10145541" y3="7.15773457" z3="1.31721565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33255596" y3="-3.95695833" z3="-2.87625793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51979377" y3="-4.98914702" z3="-2.54358228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19925394" y3="-3.63691233" z3="-3.48523117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45173309" y3="-3.95832522" z3="-3.53783003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68258449" y3="-1.61520975" z3="-2.11123298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41574638" y3="-1.1459388" z3="-2.79192042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52203336" y3="-0.94678547" z3="-1.25038335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73055731" y3="-1.6622792" z3="-2.66339361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9061,-.9553,-.6952;6.5786,-1.9532,-1.5804;6.0624,-.9987,-1.4396;4.7595,1.4759,-1.0831;4.2779,.3115,-.5101;2.6422,2.7423,-1.1404;3.9959,2.7358,-.8543;2.3816,4.9968,-.3496;1.8018,3.8585,-.8586;1.7599,5.8731,-.1384;2.0661,1.6192,-1.6596;3.1268,.3625,.2219;1.7026,.3894,-.6186;.609,.7364,.3229;1.643,-.8502,-1.4831;1.0979,-2.4757,-1.3065;2.0986,-5.503,-6.2377;1.8171,-5.0671,-5.2749;1.0813,-3.9224,-2.8303;1.7794,-3.6865,-5.1309;1.5147,-5.892,-4.1886;1.1614,-5.3136,-2.9761;1.4203,-3.0822,-3.9154;2.0217,-3.0204,-5.9627;1.568,-6.9798,-4.2793;.9643,-5.9455,-2.1059;.6649,-3.3727,-1.5909;-.3372,-3.8589,-.8506;-.6755,-4.8626,-1.1208;-.384,-3.5549,.5968;-.4314,-3.0775,3.3547;-.6948,-4.5894,1.488;-.1172,-2.2771,1.0978;-.1373,-2.0407,2.468;-.7098,-4.3528,2.8613;-.8826,-5.5981,1.1081;.0951,-1.4381,.4343;.0861,-1.0325,2.8268;-.918,-5.1767,3.5489;-.4362,-2.8959,4.4334;1.3714,-1.7466,-3.8901;1.4835,-1.3363,-2.9867;.3292,3.7239,-1.0012;-2.1231,-2.9997,-1.7199;-2.9161,-3.1668,-.5808;-3.1145,-2.2827,.3414;-3.8367,-.7129,.5827;-4.6482,-.2206,-1.0248;-2.5326,.4408,1.2192;-5.1257,-1.0484,1.8976;-3.4014,-4.3757,-.3371;-4.1241,-4.6038,.863;-3.9276,.1226,-1.7836;-5.3447,.6168,-.8386;-5.2304,-1.0557,-1.4549;-1.6303,.5474,.5877;-2.1913,.1134,2.2168;-2.9943,1.439,1.3301;-5.5898,-.0979,2.2177;-5.9326,-1.7071,1.5314;-4.6699,-1.5177,2.7883;-5.0603,-4.0218,.8699;-3.5171,-4.3414,1.7431;-4.3545,-5.6775,.8662;4.2749,-2.196,-.1742;4.1373,-3.3024,-1.0251;3.4995,-4.4608,-.5977;3.002,-4.5075,.6989;3.1468,-3.4406,1.5808;3.7773,-2.2856,1.1358;4.4925,-3.2391,-2.0569;3.3626,-5.3081,-1.27;2.2663,-5.6939,1.1384;2.7406,-3.5145,2.5906;3.8682,-1.4322,1.8092;-.4872,4.0162,.1002;-1.8601,3.8135,.0464;-2.4137,3.3173,-1.1286;-1.636,3.0467,-2.2517;-.2634,3.2463,-2.1788;-.0307,4.3639,1.029;-2.4982,4.0116,.9091;-3.8522,3.0434,-1.1777;-2.1081,2.6714,-3.1606;.3612,3.0081,-3.0403;2.1713,-5.8958,2.328;1.7751,-6.404,.28;-4.3499,2.8063,-2.257;-4.4668,3.0498,-.1274;6.5944,.1592,-2.0633;5.9216,1.407,-1.9186;7.7627,.085,-2.871;8.2308,1.1903,-3.537;8.2759,-.8771,-2.9628;9.1267,1.1209,-4.1602;6.4148,2.5257,-2.647;7.5378,2.4202,-3.4317;5.8849,3.4783,-2.5852;7.8955,3.2931,-3.9852;4.5815,3.9031,-.2616;3.7678,5.0549,-.0502;5.9382,3.9524,.1667;6.466,5.0946,.7193;6.5651,3.0649,.0591;7.5113,5.1064,1.0413;4.3462,6.2267,.5117;5.6678,6.2528,.8826;3.712,7.1073,.6546;6.1015,7.1577,1.3172;-2.3326,-3.957,-2.8763;-2.5198,-4.9891,-2.5436;-3.1993,-3.6369,-3.4852;-1.4517,-3.9583,-3.5378;-1.6826,-1.6152,-2.1112;-2.4157,-1.1459,-2.7919;-1.522,-.9468,-1.2504;-.7306,-1.6623,-2.6634;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662906602643</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001862306719 0.000263671555 0.021025459901 0.005333580545</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057054913 -0.000400836 0.000072874 0.000337128 0.000382993 0.000414720 0.000466909 0.000521735 0.000638356 0.000716895 0.000891519 0.000977914 0.001146236 0.001192797 0.001342639 0.001401685 0.001501962 0.001725704 0.002230940 0.002368253 0.002464412 0.002612001 0.002837271 0.003475135 0.003577573 0.003878494 0.004342334 0.004658058 0.004799128 0.004966566 0.005210289 0.005326592 0.006246441 0.006322292 0.006820692 0.006947010 0.007197464 0.007462010 0.008175278 0.008674145 0.008905506 0.009402291 0.009734265 0.010373044 0.011094293 0.011340020 0.011755681 0.012512815 0.013259076 0.013675472 0.013969527 0.014587801 0.014924005 0.015474695 0.015783874 0.016592236 0.017140402 0.018558757 0.018847997 0.019424585 0.020338793 0.020621480 0.021344190 0.021866704 0.022357294 0.022764096 0.023395693 0.023867186 0.024503196 0.025867238 0.026566773 0.026919340 0.027244739 0.027597454 0.028190299 0.029086789 0.030851037 0.031507742 0.032983663 0.034065924 0.034629502 0.035912651 0.039017912 0.039476322 0.041935789 0.045385253 0.046089179 0.046960438 0.048694935 0.049673436 0.049841650 0.050720852 0.051534044 0.052162221 0.052285851 0.052400241 0.052728291 0.053408124 0.054921966 0.056017045 0.056367869 0.056699402 0.056991516 0.057281305 0.057752328 0.058573790 0.059221615 0.059682887 0.061094178 0.062020419 0.062769692 0.064217553 0.064531064 0.064984242 0.065966747 0.067428135 0.067916769 0.068920372 0.070517665 0.072055299 0.072599205 0.072892851 0.073377171 0.075566540 0.078555434 0.080817152 0.081538389 0.083331678 0.084656074 0.088457445 0.088939333 0.089360769 0.089845216 0.091303233 0.093310537 0.094575466 0.095475335 0.096181694 0.096832344 0.098403937 0.100113943 0.100608690 0.102619571 0.103719232 0.104159218 0.106334343 0.108764050 0.110766801 0.112194959 0.112805878 0.113702243 0.114666408 0.116888161 0.117139844 0.118544772 0.119233577 0.120563917 0.121930448 0.125172603 0.125593209 0.128469034 0.128943029 0.130877560 0.133531959 0.136290949 0.137705431 0.138642405 0.139612758 0.140332013 0.143443931 0.144591435 0.145876764 0.146749390 0.151891078 0.153588029 0.154299137 0.160700274 0.161444422 0.168464869 0.171390549 0.175881623 0.178865855 0.181482385 0.184169325 0.188913836 0.189799758 0.191786907 0.201213590 0.202169971 0.206275345 0.206922341 0.207242209 0.212176513 0.212527484 0.213742706 0.216599360 0.218662383 0.220457580 0.220975474 0.224525759 0.225426891 0.231845375 0.234535962 0.235384237 0.238403735 0.246437844 0.249195230 0.251638369 0.256517686 0.257181362 0.258251447 0.262460602 0.271564951 0.282858281 0.291983478 0.299836759 0.300000067 0.300984277 0.307061924 0.307772679 0.309791523 0.319818907 0.321328500 0.326353395 0.330077189 0.335822762 0.347716688 0.352019329 0.355600871 0.360447911 0.361605150 0.364087497 0.384467940 0.406826732 0.414377234 0.430229324 0.432591326 0.435273200 0.450778198 0.464600023 0.475428262 0.478811888 0.480327424 0.486664341 0.498893662 0.503852767 0.514414015 0.516969178 0.543773306 0.566909235 0.567662984 0.586537964 0.592145554 0.605667150 0.644149293 0.645331494 0.667955819 0.675587001 0.687364304 0.703559049 0.704340971 0.705727025 0.709303945 0.717115550 0.733953672 0.737973439 0.739483780 0.747872717 0.750754878 0.771608482 0.775965540 0.808697481 0.821748661 0.823891725 0.828910673 0.834075783 0.847120548 0.849293233 0.851392847 0.854503540 0.863277797 0.867470471 0.875555788 0.887420206 0.890979948 0.892359350 0.893403242 0.901056708 0.910297977 0.918153133 0.923918067 0.924606741 0.931794747 0.935502496 0.956031163 0.963615940 0.965142408 0.970068000 0.977902723 0.982380202 0.998614048 1.012778871 1.015056891 1.021200272 1.040051911 1.055042486 1.069755083 1.072391057 1.079398310 1.087310104 1.104296656 1.110281545 1.111771114 1.118760567 1.122520443 1.123544369 1.141850251 1.148723733 1.161741869 1.170034744 1.176675690 1.187199714 1.200742068 1.221202081 1.231703256 1.258097245 1.296393732 1.298075382 1.314685058 1.326467646 1.327122511 1.330182393 1.331355718 1.334705497 1.342091199 1.348636095 1.365385576 1.379955838 1.381283290 1.381782445 1.428366381 1.516594377 1.557972955 1.684715284 1.922913914</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">209</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90755164" y3="-0.95536703" z3="-0.69304681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58161594" y3="-1.95323491" z3="-1.57561704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06541813" y3="-0.99861976" z3="-1.43495857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7622415" y3="1.47637516" z3="-1.07885499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.27915883" y3="0.31138265" z3="-0.50803793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6447453" y3="2.74187754" z3="-1.14133291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99776821" y3="2.73599441" z3="-0.85171951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38260246" y3="4.99715957" z3="-0.35658543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80386292" y3="3.85793147" z3="-0.86364395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76085171" y3="5.87334689" z3="-0.15148112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.06996062" y3="1.61871551" z3="-1.6619314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12651246" y3="0.36164152" z3="0.22147693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70418429" y3="0.38837059" z3="-0.62208245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60868525" y3="0.73485342" z3="0.31767946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64627594" y3="-0.8508981" z3="-1.48733788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0967905" y3="-2.4749464" z3="-1.30974538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.08634793" y3="-5.50106231" z3="-6.24386455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.80721691" y3="-5.06514537" z3="-5.28035367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07691101" y3="-3.92072916" z3="-2.83405358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77008732" y3="-3.68451084" z3="-5.13614385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.507303" y3="-5.89020215" z3="-4.19348219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15675466" y3="-5.31186866" z3="-2.98005506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41386313" y3="-3.08041872" z3="-3.91970884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01066508" y3="-3.01842897" z3="-5.9683756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56030608" y3="-6.97801132" z3="-4.28443067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96135036" y3="-5.94382564" z3="-2.10953734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66220378" y3="-3.37080496" z3="-1.59422406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33930086" y3="-3.85685833" z3="-0.85267396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67767424" y3="-4.86080346" z3="-1.12208639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38354328" y3="-3.5531271" z3="0.59503622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42872892" y3="-3.07521293" z3="3.3528692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69344206" y3="-4.58756271" z3="1.48668804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11596957" y3="-2.27527708" z3="1.0955449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13541356" y3="-2.03842924" z3="2.46566485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70734455" y3="-4.35071908" z3="2.86003124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8820535" y3="-5.59595435" z3="1.10695616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09538259" y3="-1.43618169" z3="0.43175216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08811477" y3="-1.02982515" z3="2.82401258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91512378" y3="-5.17453012" z3="3.54795138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43328968" y3="-2.89292678" z3="4.43147732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3651681" y3="-1.74474557" z3="-3.89359458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48147423" y3="-1.33557037" z3="-2.99057351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33173154" y3="3.72219978" z3="-1.0081538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12486305" y3="-2.99788325" z3="-1.71830959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91688053" y3="-3.16676363" z3="-0.57861307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11378282" y3="-2.28465064" z3="0.34580591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83777981" y3="-0.71466781" z3="0.58952632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.65976445" y3="-0.22707447" z3="-1.0125659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53170586" y3="0.44228153" z3="1.21609349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11645146" y3="-1.05129762" z3="1.91355656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40175093" y3="-4.3761648" z3="-0.33608713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12265344" y3="-4.60648795" z3="0.86533024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.94294229" y3="0.10838107" z3="-1.77838496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35149981" y3="0.6147927" z3="-0.82669141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.2486272" y3="-1.06198191" z3="-1.43390799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6346644" y3="0.54883705" z3="0.57989244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18519546" y3="0.11707212" z3="2.212671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99469736" y3="1.44087592" z3="1.32540547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57963582" y3="-0.10122386" z3="2.23609122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92504337" y3="-1.71161952" z3="1.55246712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.65325183" y3="-1.51958604" z3="2.79954978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05910937" y3="-4.0251541" z3="0.87425283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51398964" y3="-4.34426834" z3="1.74481528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35278313" y3="-5.68024556" z3="0.86757869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27497181" y3="-2.19621262" z3="-0.17425586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13692139" y3="-3.30140373" z3="-1.02659173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49797255" y3="-4.45976692" z3="-0.60105471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00032636" y3="-4.5075569" z3="0.69556158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1452663" y3="-3.44177848" z3="1.5788055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77654338" y3="-2.28666335" z3="1.13536875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49262523" y3="-3.23713441" z3="-2.05819738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36078494" y3="-5.30639932" z3="-1.27441128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26474381" y3="-5.69448109" z3="1.13371272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73884141" y3="-3.51667647" z3="2.58847805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86767633" y3="-1.43415621" z3="1.80969901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48667092" y3="4.01805556" z3="0.08959899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8588154" y3="3.81207058" z3="0.03664423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41068819" y3="3.31243673" z3="-1.13827557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63151057" y3="3.04053353" z3="-2.26022455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25914946" y3="3.24195914" z3="-2.18593952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03002326" y3="4.36608949" z3="1.02031051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4990401" y3="4.01366735" z3="0.89526246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84828007" y3="3.03506534" z3="-1.18684296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.10146258" y3="2.66208354" z3="-3.16863815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36548484" y3="3.00575816" z3="-3.05033751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17008929" y3="-5.89799756" z3="2.32308342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77318037" y3="-6.40345707" z3="0.27452377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34386577" y3="2.78985593" z3="-2.26579763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46490817" y3="3.04783312" z3="-0.13784213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.59919933" y3="0.15980261" z3="-2.05637612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9264281" y3="1.40783052" z3="-1.9118222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.76927958" y3="0.08558607" z3="-2.86178384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23920985" y3="1.19116275" z3="-3.52616689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28252554" y3="-0.87669512" z3="-2.95313168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.13640683" y3="1.12169684" z3="-4.1476301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4214902" y3="2.52687582" z3="-2.63847132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54618683" y3="2.42131636" z3="-3.42126571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89178777" y3="3.47981257" z3="-2.57684756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90522352" y3="3.29438523" z3="-3.97351438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58139575" y3="3.90401026" z3="-0.25896869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76761391" y3="5.05598713" z3="-0.05317961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93614352" y3="3.95412029" z3="0.17456003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46218361" y3="5.09717613" z3="0.72690798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56274038" y3="3.06656696" z3="0.0716462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50562711" y3="5.10969193" z3="1.05361071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34461892" y3="6.22865101" z3="0.50771056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66439808" y3="6.25539466" z3="0.88374977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71038113" y3="7.10933463" z3="0.6461192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09667083" y3="7.16103" z3="1.31808488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33567031" y3="-3.95370086" z3="-2.8758873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52226447" y3="-4.98656139" z3="-2.54337741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20283151" y3="-3.63265385" z3="-3.48347258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45556691" y3="-3.9548141" z3="-3.53847614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68520068" y3="-1.6126732" z3="-2.10841691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41943079" y3="-1.142612" z3="-2.78738287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52336125" y3="-0.94588139" z3="-1.24694953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73368522" y3="-1.65911881" z3="-2.66187744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9076,-.9554,-.693;6.5816,-1.9532,-1.5756;6.0654,-.9986,-1.435;4.7622,1.4764,-1.0789;4.2792,.3114,-.508;2.6447,2.7419,-1.1413;3.9978,2.736,-.8517;2.3826,4.9972,-.3566;1.8039,3.8579,-.8636;1.7609,5.8733,-.1515;2.07,1.6187,-1.6619;3.1265,.3616,.2215;1.7042,.3884,-.6221;.6087,.7349,.3177;1.6463,-.8509,-1.4873;1.0968,-2.4749,-1.3097;2.0863,-5.5011,-6.2439;1.8072,-5.0651,-5.2804;1.0769,-3.9207,-2.8341;1.7701,-3.6845,-5.1361;1.5073,-5.8902,-4.1935;1.1568,-5.3119,-2.9801;1.4139,-3.0804,-3.9197;2.0107,-3.0184,-5.9684;1.5603,-6.978,-4.2844;.9614,-5.9438,-2.1095;.6622,-3.3708,-1.5942;-.3393,-3.8569,-.8527;-.6777,-4.8608,-1.1221;-.3835,-3.5531,.595;-.4287,-3.0752,3.3529;-.6934,-4.5876,1.4867;-.116,-2.2753,1.0955;-.1354,-2.0384,2.4657;-.7073,-4.3507,2.86;-.8821,-5.596,1.107;.0954,-1.4362,.4318;.0881,-1.0298,2.824;-.9151,-5.1745,3.548;-.4333,-2.8929,4.4315;1.3652,-1.7447,-3.8936;1.4815,-1.3356,-2.9906;.3317,3.7222,-1.0082;-2.1249,-2.9979,-1.7183;-2.9169,-3.1668,-.5786;-3.1138,-2.2847,.3458;-3.8378,-.7147,.5895;-4.6598,-.2271,-1.0126;-2.5317,.4423,1.2161;-5.1165,-1.0513,1.9136;-3.4018,-4.3762,-.3361;-4.1227,-4.6065,.8653;-3.9429,.1084,-1.7784;-5.3515,.6148,-.8267;-5.2486,-1.062,-1.4339;-1.6347,.5488,.5799;-2.1852,.1171,2.2127;-2.9947,1.4409,1.3254;-5.5796,-.1012,2.2361;-5.925,-1.7116,1.5525;-4.6533,-1.5196,2.7995;-5.0591,-4.0252,.8743;-3.514,-4.3443,1.7448;-4.3528,-5.6802,.8676;4.275,-2.1962,-.1743;4.1369,-3.3014,-1.0266;3.498,-4.4598,-.6011;3.0003,-4.5076,.6956;3.1453,-3.4418,1.5788;3.7765,-2.2867,1.1354;4.4926,-3.2371,-2.0582;3.3608,-5.3064,-1.2744;2.2647,-5.6945,1.1337;2.7388,-3.5167,2.5885;3.8677,-1.4342,1.8097;-.4867,4.0181,.0896;-1.8588,3.8121,.0366;-2.4107,3.3124,-1.1383;-1.6315,3.0405,-2.2602;-.2591,3.242,-2.1859;-.03,4.3661,1.0203;-2.499,4.0137,.8953;-3.8483,3.0351,-1.1868;-2.1015,2.6621,-3.1686;.3655,3.0058,-3.0503;2.1701,-5.898,2.3231;1.7732,-6.4035,.2745;-4.3439,2.7899,-2.2658;-4.4649,3.0478,-.1378;6.5992,.1598,-2.0564;5.9264,1.4078,-1.9118;7.7693,.0856,-2.8618;8.2392,1.1912,-3.5262;8.2825,-.8767,-2.9531;9.1364,1.1217,-4.1476;6.4215,2.5269,-2.6385;7.5462,2.4213,-3.4213;5.8918,3.4798,-2.5768;7.9052,3.2944,-3.9735;4.5814,3.904,-.259;3.7676,5.056,-.0532;5.9361,3.9541,.1746;6.4622,5.0972,.7269;6.5627,3.0666,.0716;7.5056,5.1097,1.0536;4.3446,6.2287,.5077;5.6644,6.2554,.8837;3.7104,7.1093,.6461;6.0967,7.161,1.3181;-2.3357,-3.9537,-2.8759;-2.5223,-4.9866,-2.5434;-3.2028,-3.6327,-3.4835;-1.4556,-3.9548,-3.5385;-1.6852,-1.6127,-2.1084;-2.4194,-1.1426,-2.7874;-1.5234,-.9459,-1.2469;-.7337,-1.6591,-2.6619;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662912680426</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001915508712 0.000257854389 0.022126762500 0.005336525906</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057059703 -0.000365503 0.000072922 0.000337156 0.000382983 0.000415099 0.000467064 0.000521982 0.000638353 0.000716919 0.000892117 0.000983619 0.001147144 0.001194642 0.001342655 0.001401703 0.001504068 0.001750023 0.002235813 0.002369763 0.002464554 0.002613363 0.002840361 0.003477518 0.003578942 0.003878492 0.004346302 0.004658002 0.004800010 0.004992185 0.005210461 0.005328906 0.006249231 0.006329970 0.006822654 0.006950617 0.007197690 0.007462608 0.008175902 0.008680242 0.008906605 0.009402689 0.009742184 0.010379703 0.011095517 0.011340268 0.011756672 0.012513184 0.013259609 0.013675953 0.013970038 0.014589133 0.014924296 0.015476292 0.015790190 0.016592630 0.017142200 0.018559441 0.018848155 0.019427936 0.020338697 0.020624116 0.021373463 0.021867871 0.022360238 0.022764222 0.023406267 0.023867093 0.024504555 0.025869658 0.026568468 0.026919377 0.027247376 0.027598029 0.028190336 0.029087237 0.030854145 0.031508219 0.032984114 0.034065945 0.034629829 0.035918684 0.039018415 0.039481758 0.041937757 0.045386367 0.046089246 0.046969852 0.048699261 0.049675661 0.049849196 0.050722178 0.051534050 0.052165390 0.052286487 0.052401617 0.052728702 0.053420648 0.054922065 0.056017824 0.056367939 0.056700656 0.056992104 0.057282384 0.057754382 0.058574364 0.059223764 0.059684838 0.061130783 0.062020473 0.062778009 0.064218951 0.064531328 0.064986219 0.065966583 0.067430785 0.067917789 0.068921416 0.070518213 0.072061503 0.072599854 0.072895535 0.073384124 0.075571812 0.078555842 0.080817324 0.081542539 0.083331859 0.084662053 0.088466471 0.088957755 0.089363187 0.089846128 0.091304051 0.093310676 0.094575664 0.095475471 0.096181811 0.096836051 0.098404123 0.100114223 0.100608791 0.102619701 0.103719360 0.104160887 0.106337282 0.108765596 0.110766937 0.112194904 0.112805883 0.113704584 0.114679027 0.116894469 0.117141029 0.118562523 0.119233755 0.120565531 0.121965069 0.125178928 0.125593694 0.128469347 0.128943629 0.130877563 0.133534302 0.136297804 0.137705375 0.138643844 0.139612926 0.140337789 0.143459586 0.144607443 0.145885877 0.146749995 0.151898480 0.153590471 0.154302336 0.160751618 0.161464118 0.168464872 0.171398627 0.175881864 0.178869129 0.181493898 0.184240559 0.188918629 0.189803556 0.191789007 0.201214493 0.202170442 0.206275702 0.206931291 0.207246616 0.212190164 0.212528992 0.213865650 0.216605578 0.218780597 0.220470966 0.220976689 0.224533184 0.225428451 0.231845412 0.234536598 0.235384283 0.238407356 0.246438214 0.249210253 0.251638742 0.256520411 0.257183644 0.258251482 0.262465201 0.271565192 0.282858476 0.291983836 0.299838838 0.300019789 0.300987238 0.307067898 0.307772712 0.309791870 0.319819849 0.321331820 0.326366334 0.330077823 0.335876131 0.347718908 0.352019397 0.355608321 0.360463912 0.361605109 0.364092750 0.384478632 0.406851709 0.414381520 0.430235505 0.432595675 0.435273485 0.450778247 0.464600139 0.475442672 0.478812380 0.480328732 0.486664440 0.498893787 0.503859801 0.514442070 0.516994286 0.543775165 0.566909286 0.567664023 0.586538136 0.592156241 0.605672922 0.644149246 0.645333308 0.667956765 0.675587079 0.687364769 0.703561745 0.704340978 0.705730810 0.709305622 0.717115663 0.733964889 0.737974464 0.739522794 0.747873423 0.750755863 0.771608500 0.775966515 0.808708885 0.821763813 0.823891771 0.828910703 0.834106717 0.847121274 0.849296161 0.851393170 0.854503551 0.863277959 0.867470515 0.875581830 0.887420910 0.890987745 0.892377500 0.893403356 0.901073116 0.910308866 0.918164933 0.923978039 0.924656471 0.931797776 0.935510374 0.956033751 0.963631176 0.965142407 0.970069267 0.977966952 0.982380410 0.998614246 1.012779404 1.015097259 1.021217788 1.040059098 1.055048087 1.069851161 1.072391536 1.079400129 1.087311456 1.104586138 1.110293408 1.111873632 1.118760823 1.122521628 1.123545174 1.141850721 1.148725731 1.161741875 1.170034750 1.176676457 1.187200072 1.200742427 1.221206685 1.231726766 1.258097797 1.296397134 1.298079319 1.314694241 1.326473794 1.327167915 1.330183250 1.331361262 1.334705728 1.342092226 1.348636734 1.365386607 1.379957535 1.381284025 1.381789644 1.428483196 1.516611206 1.557972991 1.684715365 1.922954620</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">210</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90953094" y3="-0.95508932" z3="-0.69066856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58563798" y3="-1.95283107" z3="-1.5693227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06919754" y3="-0.99822126" z3="-1.42969384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76476945" y3="1.47645998" z3="-1.07706096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28058308" y3="0.31152463" z3="-0.50709882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64713619" y3="2.74154617" z3="-1.14567498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99945645" y3="2.73599964" z3="-0.85265001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38218625" y3="4.99750035" z3="-0.36111878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80512365" y3="3.85789033" z3="-0.87012122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75922272" y3="5.87412312" z3="-0.15470017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07397129" y3="1.6177584" z3="-1.66634727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12634997" y3="0.36154185" z3="0.21996006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70577978" y3="0.38829466" z3="-0.62644382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.608377" y3="0.73554275" z3="0.31072273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64949217" y3="-0.85135459" z3="-1.49114986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09627813" y3="-2.47390372" z3="-1.31237733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.07327161" y3="-5.49855381" z3="-6.24997944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79664791" y3="-5.06292627" z3="-5.28562484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07281743" y3="-3.9192318" z3="-2.83704787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76018213" y3="-3.68236793" z3="-5.14083915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4993068" y3="-5.88826306" z3="-4.19827209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15195373" y3="-5.31027497" z3="-2.98376948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40716986" y3="-3.07864117" z3="-3.92329958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.99878225" y3="-3.01601858" z3="-5.97341791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55182873" y3="-6.97604165" z3="-4.28971441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95831879" y3="-5.94244227" z3="-2.11302512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66089537" y3="-3.36995579" z3="-1.59597308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3400697" y3="-3.8551698" z3="-0.85352421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67912481" y3="-4.8590137" z3="-1.12233271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38294462" y3="-3.55073232" z3="0.59415941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42494092" y3="-3.07286331" z3="3.35208328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69211541" y3="-4.58493875" z3="1.48627906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1150866" y3="-2.27273691" z3="1.0941837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1326572" y3="-2.03613816" z3="2.46440193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7045813" y3="-4.34803119" z3="2.85960777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88108641" y3="-5.5934509" z3="1.10694003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09530161" y3="-1.43359179" z3="0.43021967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09138646" y3="-1.02762398" z3="2.82242844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91141425" y3="-5.1719261" z3="3.54796909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42779496" y3="-2.89097099" z3="4.43076533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35858091" y3="-1.74293402" z3="-3.89681698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47817516" y3="-1.33396169" z3="-2.99389646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33325317" y3="3.72142704" z3="-1.01743177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12678498" y3="-2.99579149" z3="-1.71678402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91729504" y3="-3.16648577" z3="-0.57628893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11328409" y3="-2.2855219" z3="0.34943766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83797681" y3="-0.7177263" z3="0.59713818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66975996" y3="-0.23426688" z3="-1.00200591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53259812" y3="0.4448353" z3="1.21525639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10810613" y3="-1.05607074" z3="1.92935831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40187705" y3="-4.37618386" z3="-0.33548722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12252076" y3="-4.60841684" z3="0.86510861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.95735879" y3="0.09455283" z3="-1.77458998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35588673" y3="0.61115169" z3="-0.81388246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.26522285" y3="-1.0688805" z3="-1.41435391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63686698" y3="0.55183598" z3="0.57525555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18052046" y3="0.12443697" z3="2.21148466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99797625" y3="1.4415006" z3="1.32474277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57181368" y3="-0.10716433" z3="2.25475172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91690513" y3="-1.7186916" z3="1.57459388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6381576" y3="-1.52235946" z3="2.81386284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05926276" y3="-4.02736195" z3="0.8751695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51448207" y3="-4.34828336" z3="1.74502653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35198174" y3="-5.68236375" z3="0.86545277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2756474" y3="-2.19611972" z3="-0.17376302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13657625" y3="-3.29970911" z3="-1.02787892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49677839" y3="-4.45833374" z3="-0.60410546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99953185" y3="-4.50803119" z3="0.69258256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14522804" y3="-3.4437628" z3="1.57742208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77706362" y3="-2.28819741" z3="1.13561158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49232017" y3="-3.23385001" z3="-2.05932895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35840117" y3="-5.30341932" z3="-1.27885313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26320795" y3="-5.69498637" z3="1.1289892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73868835" y3="-3.5198914" z3="2.58695817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86854663" y3="-1.4365719" z3="1.811131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48678531" y3="4.01806003" z3="0.08010308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85917574" y3="3.81233683" z3="0.02365046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40849971" y3="3.30784635" z3="-1.14968009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62732327" y3="3.03310473" z3="-2.26929476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25542946" y3="3.23705161" z3="-2.19443206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03343592" y3="4.37141327" z3="1.00846012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49997005" y3="4.01397223" z3="0.88344687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84610344" y3="3.02895687" z3="-1.20023788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09611922" y3="2.65117885" z3="-3.1771312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37155747" y3="2.99616724" z3="-3.05326086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16875236" y3="-5.90035482" z3="2.31806172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77090497" y3="-6.40216787" z3="0.26879378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33918117" y3="2.77545006" z3="-2.27811611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46470778" y3="3.04823455" z3="-0.15254004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6046119" y3="0.16038881" z3="-2.04939841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93125554" y3="1.40813498" z3="-1.90670319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77706215" y3="0.0867191" z3="-2.85119935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2489689" y3="1.19267025" z3="-3.51355917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2906461" y3="-0.87539919" z3="-2.94131546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.14806651" y3="1.12368395" z3="-4.13211455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42838898" y3="2.5274852" z3="-2.63144974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55556447" y3="2.42259891" z3="-3.41043683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89847753" y3="3.48023024" z3="-2.57125164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91624936" y3="3.29605179" z3="-3.96099833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5814334" y3="3.90444563" z3="-0.25892423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76661327" y3="5.05668485" z3="-0.05449528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93560088" y3="3.95463907" z3="0.17729852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46048052" y3="5.09801979" z3="0.73026237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5628774" y3="3.06681524" z3="0.07521633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50392526" y3="5.11037576" z3="1.05840154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34194036" y3="6.22971906" z3="0.50810664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66152578" y3="6.25655778" z3="0.88631952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70699967" y3="7.11073745" z3="0.64587264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09281077" y3="7.16249062" z3="1.32135625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33894066" y3="-3.94994147" z3="-2.87526115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52340079" y3="-4.98348671" z3="-2.54493016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2082562" y3="-3.62935669" z3="-3.48035381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46030546" y3="-3.94813275" z3="-3.53968427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68819899" y3="-1.60987288" z3="-2.10569267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42329115" y3="-1.13908451" z3="-2.7833074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52587811" y3="-0.94378676" z3="-1.24345632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73754797" y3="-1.65525067" z3="-2.6605033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9095,-.9551,-.6907;6.5856,-1.9528,-1.5693;6.0692,-.9982,-1.4297;4.7648,1.4765,-1.0771;4.2806,.3115,-.5071;2.6471,2.7415,-1.1457;3.9995,2.736,-.8527;2.3822,4.9975,-.3611;1.8051,3.8579,-.8701;1.7592,5.8741,-.1547;2.074,1.6178,-1.6663;3.1263,.3615,.22;1.7058,.3883,-.6264;.6084,.7355,.3107;1.6495,-.8514,-1.4911;1.0963,-2.4739,-1.3124;2.0733,-5.4986,-6.25;1.7966,-5.0629,-5.2856;1.0728,-3.9192,-2.837;1.7602,-3.6824,-5.1408;1.4993,-5.8883,-4.1983;1.152,-5.3103,-2.9838;1.4072,-3.0786,-3.9233;1.9988,-3.016,-5.9734;1.5518,-6.976,-4.2897;.9583,-5.9424,-2.113;.6609,-3.37,-1.596;-.3401,-3.8552,-.8535;-.6791,-4.859,-1.1223;-.3829,-3.5507,.5942;-.4249,-3.0729,3.3521;-.6921,-4.5849,1.4863;-.1151,-2.2727,1.0942;-.1327,-2.0361,2.4644;-.7046,-4.348,2.8596;-.8811,-5.5935,1.1069;.0953,-1.4336,.4302;.0914,-1.0276,2.8224;-.9114,-5.1719,3.548;-.4278,-2.891,4.4308;1.3586,-1.7429,-3.8968;1.4782,-1.334,-2.9939;.3333,3.7214,-1.0174;-2.1268,-2.9958,-1.7168;-2.9173,-3.1665,-.5763;-3.1133,-2.2855,.3494;-3.838,-.7177,.5971;-4.6698,-.2343,-1.002;-2.5326,.4448,1.2153;-5.1081,-1.0561,1.9294;-3.4019,-4.3762,-.3355;-4.1225,-4.6084,.8651;-3.9574,.0946,-1.7746;-5.3559,.6112,-.8139;-5.2652,-1.0689,-1.4144;-1.6369,.5518,.5753;-2.1805,.1244,2.2115;-2.998,1.4415,1.3247;-5.5718,-.1072,2.2548;-5.9169,-1.7187,1.5746;-4.6382,-1.5224,2.8139;-5.0593,-4.0274,.8752;-3.5145,-4.3483,1.745;-4.352,-5.6824,.8655;4.2756,-2.1961,-.1738;4.1366,-3.2997,-1.0279;3.4968,-4.4583,-.6041;2.9995,-4.508,.6926;3.1452,-3.4438,1.5774;3.7771,-2.2882,1.1356;4.4923,-3.2339,-2.0593;3.3584,-5.3034,-1.2789;2.2632,-5.695,1.129;2.7387,-3.5199,2.587;3.8685,-1.4366,1.8111;-.4868,4.0181,.0801;-1.8592,3.8123,.0237;-2.4085,3.3078,-1.1497;-1.6273,3.0331,-2.2693;-.2554,3.2371,-2.1944;-.0334,4.3714,1.0085;-2.5,4.014,.8834;-3.8461,3.029,-1.2002;-2.0961,2.6512,-3.1771;.3716,2.9962,-3.0533;2.1688,-5.9004,2.3181;1.7709,-6.4022,.2688;-4.3392,2.7755,-2.2781;-4.4647,3.0482,-.1525;6.6046,.1604,-2.0494;5.9313,1.4081,-1.9067;7.7771,.0867,-2.8512;8.249,1.1927,-3.5136;8.2906,-.8754,-2.9413;9.1481,1.1237,-4.1321;6.4284,2.5275,-2.6314;7.5556,2.4226,-3.4104;5.8985,3.4802,-2.5713;7.9162,3.2961,-3.961;4.5814,3.9044,-.2589;3.7666,5.0567,-.0545;5.9356,3.9546,.1773;6.4605,5.098,.7303;6.5629,3.0668,.0752;7.5039,5.1104,1.0584;4.3419,6.2297,.5081;5.6615,6.2566,.8863;3.707,7.1107,.6459;6.0928,7.1625,1.3214;-2.3389,-3.9499,-2.8753;-2.5234,-4.9835,-2.5449;-3.2083,-3.6294,-3.4804;-1.4603,-3.9481,-3.5397;-1.6882,-1.6099,-2.1057;-2.4233,-1.1391,-2.7833;-1.5259,-.9438,-1.2435;-.7375,-1.6553,-2.6605;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662917892314</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001934694579 0.000242803895 0.021428511479 0.005329057557</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057064163 -0.000318849 0.000072969 0.000337576 0.000383091 0.000415201 0.000467040 0.000521990 0.000638356 0.000717003 0.000892455 0.000984187 0.001147398 0.001195397 0.001342918 0.001401940 0.001503997 0.001751776 0.002236826 0.002371836 0.002464897 0.002613251 0.002843179 0.003484967 0.003584977 0.003879653 0.004347196 0.004658267 0.004800998 0.005014161 0.005210559 0.005328649 0.006250696 0.006337290 0.006822979 0.006955725 0.007197720 0.007462507 0.008177005 0.008681946 0.008906310 0.009402797 0.009753311 0.010386709 0.011099799 0.011340264 0.011757083 0.012514413 0.013259575 0.013676148 0.013971403 0.014590094 0.014925403 0.015479653 0.015800795 0.016593503 0.017143386 0.018559734 0.018848786 0.019430973 0.020339080 0.020625417 0.021399918 0.021868014 0.022360474 0.022764221 0.023419132 0.023867408 0.024506734 0.025870613 0.026570443 0.026919458 0.027248322 0.027599787 0.028190369 0.029087265 0.030856969 0.031508198 0.032986866 0.034065919 0.034629978 0.035923271 0.039018469 0.039484430 0.041940448 0.045388262 0.046089462 0.046976456 0.048702907 0.049677038 0.049854344 0.050724309 0.051534054 0.052167698 0.052286904 0.052402817 0.052729919 0.053431734 0.054922051 0.056018215 0.056368104 0.056701685 0.056992650 0.057283887 0.057754929 0.058574902 0.059224559 0.059687898 0.061168453 0.062020677 0.062786113 0.064220225 0.064531382 0.064988418 0.065966587 0.067433727 0.067919795 0.068923409 0.070518742 0.072068345 0.072599798 0.072897034 0.073386583 0.075580696 0.078555981 0.080817415 0.081547989 0.083331866 0.084664024 0.088480554 0.088967088 0.089365275 0.089845978 0.091304406 0.093310719 0.094575675 0.095475490 0.096181937 0.096838001 0.098404195 0.100114633 0.100609022 0.102619737 0.103720675 0.104161306 0.106342838 0.108767598 0.110766953 0.112194997 0.112805894 0.113706783 0.114687129 0.116895818 0.117143221 0.118577603 0.119233991 0.120566722 0.122000192 0.125183006 0.125594771 0.128469897 0.128944028 0.130877547 0.133536100 0.136307736 0.137705331 0.138644415 0.139612992 0.140348033 0.143468250 0.144617637 0.145890202 0.146750770 0.151904228 0.153593358 0.154304575 0.160785358 0.161470618 0.168465042 0.171403355 0.175882008 0.178871896 0.181501965 0.184282332 0.188922801 0.189807153 0.191792273 0.201214497 0.202170891 0.206275877 0.206938688 0.207250443 0.212207207 0.212530840 0.213993642 0.216615736 0.218905208 0.220483447 0.220978373 0.224536494 0.225429933 0.231845419 0.234537477 0.235384357 0.238409274 0.246439405 0.249212201 0.251639426 0.256523172 0.257185763 0.258251540 0.262470792 0.271565528 0.282858471 0.291984179 0.299841716 0.300040163 0.300990404 0.307073040 0.307772857 0.309791962 0.319820003 0.321335162 0.326378178 0.330077993 0.335917523 0.347721990 0.352019420 0.355615345 0.360478684 0.361605421 0.364098635 0.384483764 0.406870128 0.414384908 0.430237161 0.432595992 0.435273548 0.450778257 0.464601673 0.475449223 0.478812642 0.480329683 0.486666562 0.498893810 0.503861806 0.514464416 0.517035413 0.543775309 0.566909411 0.567664215 0.586538259 0.592175088 0.605682223 0.644149407 0.645334253 0.667957359 0.675587902 0.687365300 0.703562791 0.704341081 0.705732024 0.709306798 0.717115968 0.733973352 0.737974896 0.739544932 0.747874039 0.750758211 0.771608635 0.775967398 0.808721174 0.821773982 0.823891784 0.828910851 0.834131092 0.847121290 0.849300860 0.851393539 0.854503676 0.863278368 0.867470518 0.875600674 0.887423198 0.890991820 0.892383487 0.893404113 0.901092634 0.910312340 0.918171767 0.923998391 0.924687574 0.931805296 0.935521968 0.956038464 0.963646624 0.965142809 0.970073667 0.978053059 0.982380496 0.998614312 1.012779863 1.015141548 1.021244303 1.040064613 1.055054942 1.069953093 1.072391637 1.079402004 1.087313645 1.104884461 1.110306513 1.111997255 1.118762112 1.122522036 1.123545395 1.141851910 1.148727253 1.161741954 1.170034946 1.176676669 1.187201043 1.200742618 1.221214779 1.231746315 1.258098983 1.296398059 1.298084674 1.314697961 1.326477916 1.327201038 1.330183845 1.331363615 1.334706196 1.342094123 1.348637071 1.365386621 1.379958151 1.381284222 1.381799472 1.428560384 1.516637145 1.557973435 1.684715502 1.922956801</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">211</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91096975" y3="-0.95498213" z3="-0.68937636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58914811" y3="-1.95259115" z3="-1.56414235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07252999" y3="-0.99793859" z3="-1.42536597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76734255" y3="1.47681459" z3="-1.07463573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2817748" y3="0.3115753" z3="-0.50637303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64956509" y3="2.74125596" z3="-1.1476628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00122099" y3="2.73622905" z3="-0.85151637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3820943" y3="4.99719677" z3="-0.36552831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80633858" y3="3.85708508" z3="-0.87438049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7588381" y3="5.87337343" z3="-0.16377458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07832187" y3="1.6172053" z3="-1.67016484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12613452" y3="0.36110723" z3="0.21846319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70695253" y3="0.38857299" z3="-0.63048297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60824612" y3="0.7377563" z3="0.30443979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65114678" y3="-0.85154765" z3="-1.49462629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09499426" y3="-2.4730201" z3="-1.3155548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06075866" y3="-5.49732602" z3="-6.2558038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.78653849" y3="-5.06163481" z3="-5.29076286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06821353" y3="-3.91782602" z3="-2.84062533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75065466" y3="-3.68098341" z3="-5.14590252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4916939" y3="-5.88696395" z3="-4.20270562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14706862" y3="-5.30894161" z3="-2.98737113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4004967" y3="-3.07726027" z3="-3.92754916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98742192" y3="-3.01468163" z3="-5.97907564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5438748" y3="-6.97477855" z3="-4.29432144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9551777" y3="-5.94107977" z3="-2.1161857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65806132" y3="-3.36804227" z3="-1.59917581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34205329" y3="-3.85331165" z3="-0.85498891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68160213" y3="-4.85709508" z3="-1.12339879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3821496" y3="-3.54955325" z3="0.59285912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42215619" y3="-3.0704686" z3="3.35061973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69037773" y3="-4.5836155" z3="1.48547819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11328193" y3="-2.27168883" z3="1.09246153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12989365" y3="-2.03436339" z3="2.46257183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70173392" y3="-4.34621599" z3="2.85879363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87954221" y3="-5.59237307" z3="1.10662112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09649404" y3="-1.43279" z3="0.42789088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09474262" y3="-1.02584314" z3="2.82023472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90863938" y3="-5.16962794" z3="3.54721795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42463039" y3="-2.88776193" z3="4.42918505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35212619" y3="-1.74152762" z3="-3.90044801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47523853" y3="-1.33331459" z3="-2.99779997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33484905" y3="3.71959507" z3="-1.02397811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12852158" y3="-2.99330625" z3="-1.71458897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91829956" y3="-3.16591599" z3="-0.57390103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11348566" y3="-2.28721036" z3="0.35403119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83887796" y3="-0.7192371" z3="0.60427973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68081853" y3="-0.23883086" z3="-0.98972355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53134013" y3="0.44607599" z3="1.2127461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09923074" y3="-1.05894003" z3="1.94521838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40225191" y3="-4.37624005" z3="-0.3346983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12152122" y3="-4.61089639" z3="0.8666694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.97221268" y3="0.0816748" z3="-1.76963122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36075332" y3="0.61228727" z3="-0.8022865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.28483976" y3="-1.07191798" z3="-1.39327917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63959825" y3="0.55341953" z3="0.56856612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17420769" y3="0.12801081" z3="2.20771677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99728869" y3="1.4433817" z3="1.32086238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56173952" y3="-0.11047652" z3="2.27336948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90994327" y3="-1.72271479" z3="1.59602239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.62230419" y3="-1.52475225" z3="2.82566652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05849954" y3="-4.03031586" z3="0.87823411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51218384" y3="-4.35074638" z3="1.74633301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35076315" y3="-5.68479901" z3="0.86567876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27563455" y3="-2.19603744" z3="-0.17446704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13586245" y3="-3.29847964" z3="-1.03003426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49525464" y3="-4.45718911" z3="-0.60773171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99838239" y3="-4.50820048" z3="0.68908895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14446853" y3="-3.44492422" z3="1.5751847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7767016" y3="-2.28910347" z3="1.13469087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49187816" y3="-3.23157218" z3="-2.06135975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35658221" y3="-5.30176575" z3="-1.28344263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26260838" y3="-5.69609701" z3="1.1246097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73817137" y3="-3.52229256" z3="2.58472079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86850509" y3="-1.43807619" z3="1.81097749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48785817" y3="4.01957973" z3="0.06943971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85925573" y3="3.81017519" z3="0.01324539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40608639" y3="3.30227822" z3="-1.16051449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62277696" y3="3.02674912" z3="-2.27871038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25127008" y3="3.2323377" z3="-2.20116451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03520053" y3="4.37349692" z3="0.99981715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50270664" y3="4.01501508" z3="0.86866816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84265652" y3="3.02001142" z3="-1.21182531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0887286" y3="2.64182843" z3="-3.18645494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37624405" y3="2.99372763" z3="-3.06279428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.168281" y3="-5.902512" z3="2.31351918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77065306" y3="-6.40303178" z3="0.26395594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33275051" y3="2.75882898" z3="-2.28947419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46396832" y3="3.04525961" z3="-0.16584854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60977092" y3="0.16101024" z3="-2.04284512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93590015" y3="1.40873944" z3="-1.90154094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78474645" y3="0.0876689" z3="-2.84101979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25857094" y3="1.19380433" z3="-3.50168582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.298834" y3="-0.8743263" z3="-2.92960784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15976055" y3="1.12513499" z3="-4.11727909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43483324" y3="2.52813415" z3="-2.62502149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56440266" y3="2.42348103" z3="-3.40072982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90439808" y3="3.48070961" z3="-2.56671144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92651061" y3="3.29695185" z3="-3.95032423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58131213" y3="3.90502728" z3="-0.25665847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76576521" y3="5.05692965" z3="-0.05579474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93401186" y3="3.95614136" z3="0.18342828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45665565" y3="5.10006525" z3="0.73729704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56173214" y3="3.06869985" z3="0.08418203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49859867" y3="5.11334508" z3="1.0689927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33937263" y3="6.230531" z3="0.50671734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65735122" y3="6.25823602" z3="0.88917187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70394482" y3="7.11108398" z3="0.64079364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08702265" y3="7.16459477" z3="1.32466153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34191182" y3="-3.94565775" z3="-2.87448234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52542646" y3="-4.97985757" z3="-2.5449467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21191118" y3="-3.62410845" z3="-3.47760012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46428197" y3="-3.94289012" z3="-3.54029647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6903257" y3="-1.60685707" z3="-2.10163926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42620879" y3="-1.13496858" z3="-2.77767192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5270147" y3="-0.94271354" z3="-1.23849349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74000711" y3="-1.6514179" z3="-2.65747529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.911,-.955,-.6894;6.5891,-1.9526,-1.5641;6.0725,-.9979,-1.4254;4.7673,1.4768,-1.0746;4.2818,.3116,-.5064;2.6496,2.7413,-1.1477;4.0012,2.7362,-.8515;2.3821,4.9972,-.3655;1.8063,3.8571,-.8744;1.7588,5.8734,-.1638;2.0783,1.6172,-1.6702;3.1261,.3611,.2185;1.707,.3886,-.6305;.6082,.7378,.3044;1.6511,-.8515,-1.4946;1.095,-2.473,-1.3156;2.0608,-5.4973,-6.2558;1.7865,-5.0616,-5.2908;1.0682,-3.9178,-2.8406;1.7507,-3.681,-5.1459;1.4917,-5.887,-4.2027;1.1471,-5.3089,-2.9874;1.4005,-3.0773,-3.9275;1.9874,-3.0147,-5.9791;1.5439,-6.9748,-4.2943;.9552,-5.9411,-2.1162;.6581,-3.368,-1.5992;-.3421,-3.8533,-.855;-.6816,-4.8571,-1.1234;-.3821,-3.5496,.5929;-.4222,-3.0705,3.3506;-.6904,-4.5836,1.4855;-.1133,-2.2717,1.0925;-.1299,-2.0344,2.4626;-.7017,-4.3462,2.8588;-.8795,-5.5924,1.1066;.0965,-1.4328,.4279;.0947,-1.0258,2.8202;-.9086,-5.1696,3.5472;-.4246,-2.8878,4.4292;1.3521,-1.7415,-3.9004;1.4752,-1.3333,-2.9978;.3348,3.7196,-1.024;-2.1285,-2.9933,-1.7146;-2.9183,-3.1659,-.5739;-3.1135,-2.2872,.354;-3.8389,-.7192,.6043;-4.6808,-.2388,-.9897;-2.5313,.4461,1.2127;-5.0992,-1.0589,1.9452;-3.4023,-4.3762,-.3347;-4.1215,-4.6109,.8667;-3.9722,.0817,-1.7696;-5.3608,.6123,-.8023;-5.2848,-1.0719,-1.3933;-1.6396,.5534,.5686;-2.1742,.128,2.2077;-2.9973,1.4434,1.3209;-5.5617,-.1105,2.2734;-5.9099,-1.7227,1.596;-4.6223,-1.5248,2.8257;-5.0585,-4.0303,.8782;-3.5122,-4.3507,1.7463;-4.3508,-5.6848,.8657;4.2756,-2.196,-.1745;4.1359,-3.2985,-1.03;3.4953,-4.4572,-.6077;2.9984,-4.5082,.6891;3.1445,-3.4449,1.5752;3.7767,-2.2891,1.1347;4.4919,-3.2316,-2.0614;3.3566,-5.3018,-1.2834;2.2626,-5.6961,1.1246;2.7382,-3.5223,2.5847;3.8685,-1.4381,1.811;-.4879,4.0196,.0694;-1.8593,3.8102,.0132;-2.4061,3.3023,-1.1605;-1.6228,3.0267,-2.2787;-.2513,3.2323,-2.2012;-.0352,4.3735,.9998;-2.5027,4.015,.8687;-3.8427,3.02,-1.2118;-2.0887,2.6418,-3.1865;.3762,2.9937,-3.0628;2.1683,-5.9025,2.3135;1.7707,-6.403,.264;-4.3328,2.7588,-2.2895;-4.464,3.0453,-.1658;6.6098,.161,-2.0428;5.9359,1.4087,-1.9015;7.7847,.0877,-2.841;8.2586,1.1938,-3.5017;8.2988,-.8743,-2.9296;9.1598,1.1251,-4.1173;6.4348,2.5281,-2.625;7.5644,2.4235,-3.4007;5.9044,3.4807,-2.5667;7.9265,3.297,-3.9503;4.5813,3.905,-.2567;3.7658,5.0569,-.0558;5.934,3.9561,.1834;6.4567,5.1001,.7373;6.5617,3.0687,.0842;7.4986,5.1133,1.069;4.3394,6.2305,.5067;5.6574,6.2582,.8892;3.7039,7.1111,.6408;6.087,7.1646,1.3247;-2.3419,-3.9457,-2.8745;-2.5254,-4.9799,-2.5449;-3.2119,-3.6241,-3.4776;-1.4643,-3.9429,-3.5403;-1.6903,-1.6069,-2.1016;-2.4262,-1.135,-2.7777;-1.527,-.9427,-1.2385;-.74,-1.6514,-2.6575;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662921899695</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001946425167 0.000238057372 0.020789764137 0.005327855171</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057069726 -0.000304752 0.000073229 0.000337546 0.000383843 0.000415195 0.000467122 0.000522209 0.000638396 0.000717340 0.000892777 0.000984191 0.001147562 0.001195767 0.001342992 0.001402620 0.001504550 0.001754323 0.002236662 0.002372719 0.002466338 0.002613369 0.002845404 0.003492306 0.003591340 0.003881935 0.004347246 0.004659603 0.004801755 0.005027976 0.005210596 0.005329711 0.006250919 0.006344371 0.006822976 0.006959734 0.007198938 0.007463129 0.008177428 0.008681845 0.008906510 0.009403665 0.009764067 0.010389535 0.011108027 0.011339976 0.011757339 0.012517094 0.013259772 0.013676275 0.013972722 0.014590544 0.014926321 0.015483870 0.015811604 0.016594588 0.017143440 0.018559735 0.018849949 0.019433264 0.020340051 0.020625246 0.021424910 0.021868829 0.022360531 0.022764751 0.023429441 0.023867466 0.024509358 0.025870786 0.026572254 0.026919717 0.027248169 0.027599977 0.028191662 0.029087857 0.030859637 0.031508187 0.032985979 0.034065853 0.034630128 0.035927364 0.039018508 0.039485223 0.041944810 0.045390602 0.046089893 0.046977899 0.048705905 0.049677863 0.049857204 0.050728224 0.051534054 0.052169437 0.052287017 0.052403635 0.052732030 0.053440340 0.054922055 0.056018399 0.056369225 0.056703329 0.056994451 0.057284963 0.057755365 0.058575069 0.059224727 0.059692660 0.061201347 0.062020955 0.062791464 0.064220736 0.064531421 0.064991141 0.065966663 0.067437014 0.067923084 0.068926032 0.070519281 0.072073638 0.072600362 0.072897681 0.073390263 0.075592414 0.078556124 0.080817871 0.081554891 0.083331876 0.084664606 0.088483153 0.088982362 0.089366258 0.089846092 0.091304556 0.093310777 0.094575685 0.095475730 0.096182607 0.096839053 0.098404233 0.100115073 0.100609125 0.102619785 0.103722091 0.104161217 0.106350340 0.108769661 0.110767297 0.112195853 0.112805901 0.113707839 0.114692591 0.116895914 0.117144902 0.118585707 0.119234156 0.120567670 0.122028839 0.125185890 0.125597645 0.128470780 0.128943991 0.130877555 0.133537599 0.136317588 0.137705373 0.138644421 0.139613012 0.140360266 0.143471157 0.144621184 0.145892635 0.146751755 0.151910170 0.153595260 0.154305634 0.160810390 0.161479604 0.168465152 0.171404560 0.175882258 0.178872866 0.181505137 0.184295131 0.188926610 0.189808958 0.191794788 0.201215117 0.202171068 0.206275941 0.206943349 0.207253047 0.212226971 0.212533972 0.214128234 0.216634637 0.219031450 0.220493308 0.220981331 0.224536809 0.225431243 0.231845489 0.234538191 0.235384390 0.238409857 0.246440035 0.249217910 0.251641111 0.256524132 0.257187376 0.258251590 0.262477541 0.271565776 0.282858528 0.291985053 0.299845861 0.300058881 0.300993384 0.307077807 0.307773210 0.309791980 0.319820277 0.321337651 0.326387942 0.330078722 0.335949483 0.347723767 0.352019474 0.355620525 0.360483367 0.361606048 0.364102898 0.384489260 0.406888326 0.414385064 0.430237327 0.432596111 0.435273895 0.450778482 0.464605030 0.475450386 0.478812966 0.480329731 0.486666833 0.498893825 0.503863005 0.514500136 0.517069939 0.543775513 0.566909423 0.567664424 0.586538277 0.592176936 0.605686694 0.644149422 0.645335319 0.667957493 0.675588086 0.687365705 0.703565145 0.704341697 0.705749818 0.709310518 0.717116570 0.733979419 0.737975488 0.739564587 0.747874536 0.750761984 0.771608847 0.775967956 0.808731750 0.821782254 0.823891792 0.828910872 0.834152798 0.847122283 0.849302964 0.851394215 0.854503780 0.863279186 0.867470520 0.875617719 0.887425708 0.890995172 0.892389336 0.893404171 0.901112175 0.910316046 0.918172056 0.924003930 0.924708341 0.931817108 0.935537427 0.956040485 0.963652526 0.965147045 0.970075660 0.978061938 0.982383666 0.998614461 1.012784024 1.015191136 1.021277988 1.040068342 1.055061222 1.070044850 1.072391699 1.079404064 1.087316166 1.105167990 1.110319281 1.112128368 1.118765366 1.122522043 1.123545459 1.141853337 1.148728174 1.161742291 1.170035204 1.176677255 1.187202852 1.200742641 1.221227286 1.231762911 1.258099594 1.296398617 1.298093311 1.314699533 1.326479609 1.327241925 1.330184659 1.331364688 1.334706355 1.342096559 1.348639827 1.365387163 1.379958227 1.381284324 1.381802373 1.428637941 1.516645419 1.557974563 1.684715782 1.922974547</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">212</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91256115" y3="-0.95513322" z3="-0.68658666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59211352" y3="-1.95257999" z3="-1.55890362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07554067" y3="-0.99786143" z3="-1.42034345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76980107" y3="1.4768839" z3="-1.0707917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28301545" y3="0.31133437" z3="-0.50419948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65198268" y3="2.74077079" z3="-1.15037295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00277021" y3="2.73609162" z3="-0.85033628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38248423" y3="4.99773597" z3="-0.37190312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80822979" y3="3.85700329" z3="-0.88124532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75840697" y3="5.87443943" z3="-0.17092517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08192919" y3="1.61631989" z3="-1.67295084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1256584" y3="0.36022333" z3="0.21796111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70858995" y3="0.3874006" z3="-0.63419107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60763331" y3="0.73547861" z3="0.29860554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65507055" y3="-0.85228964" z3="-1.49910446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09439389" y3="-2.47168671" z3="-1.31845423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04838611" y3="-5.49444279" z3="-6.26178662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77646216" y3="-5.05902828" z3="-5.29600646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06415781" y3="-3.91597086" z3="-2.8438281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.74089855" y3="-3.67846738" z3="-5.15069567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48430271" y3="-5.88462493" z3="-4.20746463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14265012" y3="-5.30697128" z3="-2.9911651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39372843" y3="-3.07511868" z3="-3.93134793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97563986" y3="-3.01193827" z3="-5.98423243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53630449" y3="-6.9723884" z3="-4.29947253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95270743" y3="-5.93930248" z3="-2.11971498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65669841" y3="-3.36692227" z3="-1.60117593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34290489" y3="-3.85136312" z3="-0.85625411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68297644" y3="-4.8552426" z3="-1.1238848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38143235" y3="-3.54684174" z3="0.59167897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41734398" y3="-3.06820593" z3="3.34961966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6882901" y3="-4.58080454" z3="1.48481058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11290505" y3="-2.26846152" z3="1.09068373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12756692" y3="-2.03145389" z3="2.46085214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69779614" y3="-4.34352209" z3="2.85811031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87803475" y3="-5.58930821" z3="1.10609975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09528205" y3="-1.42914265" z3="0.4261553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09704403" y3="-1.02276966" z3="2.81815504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90265709" y3="-5.16740846" z3="3.5472862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41795564" y3="-2.88596574" z3="4.42823739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34520617" y3="-1.7393583" z3="-3.90388354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47191343" y3="-1.33153942" z3="-3.00143897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33709963" y3="3.71863572" z3="-1.03379704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13066047" y3="-2.99127315" z3="-1.71340018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91854217" y3="-3.16555361" z3="-0.57140527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11234726" y3="-2.28752864" z3="0.35754479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83925984" y3="-0.7214863" z3="0.61109589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69106116" y3="-0.24623227" z3="-0.97948408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53246552" y3="0.44920642" z3="1.21101027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09042653" y3="-1.0621687" z3="1.96026134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40201512" y3="-4.37620887" z3="-0.33289104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11987679" y3="-4.61230533" z3="0.86884404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98691181" y3="0.06611937" z3="-1.76636882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36453885" y3="0.6091106" z3="-0.79040243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30168771" y3="-1.07878714" z3="-1.37321342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64297332" y3="0.55603083" z3="0.56326452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17078803" y3="0.13595417" z3="2.20619294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00095486" y3="1.44472935" z3="1.31865079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55296274" y3="-0.11471789" z3="2.29134377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90154892" y3="-1.72808062" z3="1.61681216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60669907" y3="-1.52619481" z3="2.8381495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05669236" y3="-4.031589" z3="0.88284595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50983486" y3="-4.35466705" z3="1.74811727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34919962" y3="-5.68631528" z3="0.86659258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27605988" y3="-2.19652549" z3="-0.17385033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13556033" y3="-3.29730356" z3="-1.03132168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49403569" y3="-4.45618514" z3="-0.61106147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99725959" y3="-4.50913118" z3="0.68572874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14383141" y3="-3.44749113" z3="1.57355777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77673774" y3="-2.29135053" z3="1.13497224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49174817" y3="-3.22873893" z3="-2.06244887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35429619" y3="-5.29903151" z3="-1.28831774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26085233" y3="-5.69700909" z3="1.11925591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73723226" y3="-3.52611488" z3="2.58288538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86890056" y3="-1.44149086" z3="1.81260766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48717531" y3="4.01889126" z3="0.0597673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85890406" y3="3.80973405" z3="0.00005744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40323267" y3="3.29719076" z3="-1.17208942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61788943" y3="3.01894805" z3="-2.28789301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24694565" y3="3.22774054" z3="-2.21054713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03763246" y3="4.3777183" z3="0.98793879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50291566" y3="4.01417639" z3="0.85685022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83973657" y3="3.01310288" z3="-1.22478057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08277226" y3="2.63064899" z3="-3.19503837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38300538" y3="2.98474543" z3="-3.06659293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16730664" y3="-5.90579322" z3="2.30782604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76760439" y3="-6.40156038" z3="0.25745152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3277005" y3="2.74446405" z3="-2.30141505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46283474" y3="3.0441317" z3="-0.18001842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61429226" y3="0.16144371" z3="-2.03584802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94043266" y3="1.40923814" z3="-1.89485127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.7907606" y3="0.08832494" z3="-2.83194327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26626767" y3="1.19489268" z3="-3.49068932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30460196" y3="-0.87388393" z3="-2.92058421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16852579" y3="1.12633098" z3="-4.1048434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44142615" y3="2.52926567" z3="-2.6159471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57251475" y3="2.42491974" z3="-3.38952628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91150133" y3="3.48222929" z3="-2.55719289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93611522" y3="3.29893466" z3="-3.93728598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58112295" y3="3.90554453" z3="-0.25519259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76511076" y3="5.05785442" z3="-0.05783056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93256504" y3="3.95683476" z3="0.18891685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45406959" y3="5.10124968" z3="0.742857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56035152" y3="3.06900866" z3="0.09217189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49536446" y3="5.11449237" z3="1.07731477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33710138" y3="6.23199181" z3="0.50569727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65427593" y3="6.25981694" z3="0.89170712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70131108" y3="7.11308606" z3="0.63810717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08287223" y3="7.16659976" z3="1.32752651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3454327" y3="-3.94237974" z3="-2.87395172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52666554" y3="-4.97731171" z3="-2.54592807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21758804" y3="-3.62166051" z3="-3.47495366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46917014" y3="-3.9370635" z3="-3.54144502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69393187" y3="-1.6039009" z3="-2.09975751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43087149" y3="-1.13148457" z3="-2.77425236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52975362" y3="-0.94013803" z3="-1.23615396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74454998" y3="-1.64758099" z3="-2.65704377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9126,-.9551,-.6866;6.5921,-1.9526,-1.5589;6.0755,-.9979,-1.4203;4.7698,1.4769,-1.0708;4.283,.3113,-.5042;2.652,2.7408,-1.1504;4.0028,2.7361,-.8503;2.3825,4.9977,-.3719;1.8082,3.857,-.8812;1.7584,5.8744,-.1709;2.0819,1.6163,-1.673;3.1257,.3602,.218;1.7086,.3874,-.6342;.6076,.7355,.2986;1.6551,-.8523,-1.4991;1.0944,-2.4717,-1.3185;2.0484,-5.4944,-6.2618;1.7765,-5.059,-5.296;1.0642,-3.916,-2.8438;1.7409,-3.6785,-5.1507;1.4843,-5.8846,-4.2075;1.1427,-5.307,-2.9912;1.3937,-3.0751,-3.9313;1.9756,-3.0119,-5.9842;1.5363,-6.9724,-4.2995;.9527,-5.9393,-2.1197;.6567,-3.3669,-1.6012;-.3429,-3.8514,-.8563;-.683,-4.8552,-1.1239;-.3814,-3.5468,.5917;-.4173,-3.0682,3.3496;-.6883,-4.5808,1.4848;-.1129,-2.2685,1.0907;-.1276,-2.0315,2.4609;-.6978,-4.3435,2.8581;-.878,-5.5893,1.1061;.0953,-1.4291,.4262;.097,-1.0228,2.8182;-.9027,-5.1674,3.5473;-.418,-2.886,4.4282;1.3452,-1.7394,-3.9039;1.4719,-1.3315,-3.0014;.3371,3.7186,-1.0338;-2.1307,-2.9913,-1.7134;-2.9185,-3.1656,-.5714;-3.1123,-2.2875,.3575;-3.8393,-.7215,.6111;-4.6911,-.2462,-.9795;-2.5325,.4492,1.211;-5.0904,-1.0622,1.9603;-3.402,-4.3762,-.3329;-4.1199,-4.6123,.8688;-3.9869,.0661,-1.7664;-5.3645,.6091,-.7904;-5.3017,-1.0788,-1.3732;-1.643,.556,.5633;-2.1708,.136,2.2062;-3.001,1.4447,1.3187;-5.553,-.1147,2.2913;-5.9015,-1.7281,1.6168;-4.6067,-1.5262,2.8381;-5.0567,-4.0316,.8828;-3.5098,-4.3547,1.7481;-4.3492,-5.6863,.8666;4.2761,-2.1965,-.1739;4.1356,-3.2973,-1.0313;3.494,-4.4562,-.6111;2.9973,-4.5091,.6857;3.1438,-3.4475,1.5736;3.7767,-2.2914,1.135;4.4917,-3.2287,-2.0624;3.3543,-5.299,-1.2883;2.2609,-5.697,1.1193;2.7372,-3.5261,2.5829;3.8689,-1.4415,1.8126;-.4872,4.0189,.0598;-1.8589,3.8097,.0001;-2.4032,3.2972,-1.1721;-1.6179,3.0189,-2.2879;-.2469,3.2277,-2.2105;-.0376,4.3777,.9879;-2.5029,4.0142,.8569;-3.8397,3.0131,-1.2248;-2.0828,2.6306,-3.195;.383,2.9847,-3.0666;2.1673,-5.9058,2.3078;1.7676,-6.4016,.2575;-4.3277,2.7445,-2.3014;-4.4628,3.0441,-.18;6.6143,.1614,-2.0358;5.9404,1.4092,-1.8949;7.7908,.0883,-2.8319;8.2663,1.1949,-3.4907;8.3046,-.8739,-2.9206;9.1685,1.1263,-4.1048;6.4414,2.5293,-2.6159;7.5725,2.4249,-3.3895;5.9115,3.4822,-2.5572;7.9361,3.2989,-3.9373;4.5811,3.9055,-.2552;3.7651,5.0579,-.0578;5.9326,3.9568,.1889;6.4541,5.1012,.7429;6.5604,3.069,.0922;7.4954,5.1145,1.0773;4.3371,6.232,.5057;5.6543,6.2598,.8917;3.7013,7.1131,.6381;6.0829,7.1666,1.3275;-2.3454,-3.9424,-2.874;-2.5267,-4.9773,-2.5459;-3.2176,-3.6217,-3.475;-1.4692,-3.9371,-3.5414;-1.6939,-1.6039,-2.0998;-2.4309,-1.1315,-2.7743;-1.5298,-.9401,-1.2362;-.7445,-1.6476,-2.657;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662924507888</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002011988564 0.000240147490 0.021622332022 0.005347145954</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057073949 -0.000302660 0.000073529 0.000337706 0.000384845 0.000415813 0.000467726 0.000523709 0.000638392 0.000717481 0.000892937 0.000986399 0.001147614 0.001195729 0.001343106 0.001402957 0.001506248 0.001769607 0.002237076 0.002372947 0.002468382 0.002613932 0.002847871 0.003499721 0.003599499 0.003885661 0.004347590 0.004662208 0.004802088 0.005031699 0.005212069 0.005332783 0.006251156 0.006350733 0.006822834 0.006963635 0.007201722 0.007464403 0.008177569 0.008682333 0.008907204 0.009406117 0.009773915 0.010391765 0.011118646 0.011340069 0.011757416 0.012520121 0.013261988 0.013676313 0.013974495 0.014591001 0.014926899 0.015487839 0.015820105 0.016595303 0.017143399 0.018559748 0.018852131 0.019434810 0.020342205 0.020625426 0.021442941 0.021868961 0.022361592 0.022766791 0.023435345 0.023867594 0.024512297 0.025870819 0.026574471 0.026919837 0.027248188 0.027600697 0.028193606 0.029089658 0.030861162 0.031508195 0.032985822 0.034065791 0.034630209 0.035929586 0.039018818 0.039485481 0.041949663 0.045393040 0.046090660 0.046979348 0.048709256 0.049678568 0.049858617 0.050734226 0.051534055 0.052170519 0.052287022 0.052403899 0.052734886 0.053449227 0.054922111 0.056018665 0.056372018 0.056704288 0.056996541 0.057286605 0.057756663 0.058575398 0.059224713 0.059696097 0.061226442 0.062021531 0.062794364 0.064221164 0.064531440 0.064993790 0.065966666 0.067440862 0.067926682 0.068928857 0.070519390 0.072078205 0.072601738 0.072898112 0.073390167 0.075607883 0.078556217 0.080818499 0.081562272 0.083332109 0.084664833 0.088489642 0.088988981 0.089366574 0.089847339 0.091304709 0.093310875 0.094575747 0.095476436 0.096183057 0.096839224 0.098404292 0.100116112 0.100609554 0.102619785 0.103724273 0.104161308 0.106359144 0.108770351 0.110770071 0.112198005 0.112805932 0.113709186 0.114695562 0.116900044 0.117146631 0.118591978 0.119234306 0.120568156 0.122050916 0.125187844 0.125602617 0.128472337 0.128944096 0.130877693 0.133538499 0.136326168 0.137705298 0.138644599 0.139613155 0.140377404 0.143471914 0.144621577 0.145893696 0.146752744 0.151913677 0.153596966 0.154306323 0.160818464 0.161481958 0.168465665 0.171404598 0.175883345 0.178872870 0.181505887 0.184295370 0.188931518 0.189809665 0.191799529 0.201216785 0.202171250 0.206275973 0.206946156 0.207254785 0.212246639 0.212539003 0.214268613 0.216659946 0.219182543 0.220501869 0.220985853 0.224537466 0.225432364 0.231845667 0.234538696 0.235384654 0.238410005 0.246443560 0.249219847 0.251647314 0.256524643 0.257188472 0.258251659 0.262483927 0.271566002 0.282858781 0.291986585 0.299848674 0.300073612 0.300996023 0.307082041 0.307773618 0.309792101 0.319820393 0.321338910 0.326394963 0.330079495 0.335977980 0.347725071 0.352019498 0.355623001 0.360486543 0.361607398 0.364106000 0.384491738 0.406898799 0.414385721 0.430237630 0.432596049 0.435274063 0.450779138 0.464612035 0.475450768 0.478813137 0.480329851 0.486668334 0.498893829 0.503864113 0.514532719 0.517117006 0.543775685 0.566909491 0.567664436 0.586538314 0.592182545 0.605691700 0.644149558 0.645335427 0.667957563 0.675589980 0.687366009 0.703565155 0.704342659 0.705758025 0.709310781 0.717119305 0.733983249 0.737975548 0.739571552 0.747874875 0.750766515 0.771609025 0.775968057 0.808743994 0.821787493 0.823891937 0.828911128 0.834167467 0.847124960 0.849307299 0.851394702 0.854503911 0.863280140 0.867470535 0.875632197 0.887428891 0.890995824 0.892390003 0.893404407 0.901139548 0.910317166 0.918172314 0.924004230 0.924714413 0.931833317 0.935554338 0.956043120 0.963656566 0.965152064 0.970081747 0.978086384 0.982387429 0.998614897 1.012796255 1.015248112 1.021320930 1.040071706 1.055065862 1.070130565 1.072392384 1.079406569 1.087318995 1.105463713 1.110331863 1.112278743 1.118768808 1.122522894 1.123546783 1.141854279 1.148728389 1.161742674 1.170035239 1.176680112 1.187207023 1.200742642 1.221241567 1.231783846 1.258100117 1.296398693 1.298106417 1.314699548 1.326479856 1.327253141 1.330185127 1.331364796 1.334706525 1.342099620 1.348646347 1.365388566 1.379959086 1.381284319 1.381804193 1.428691591 1.516677756 1.557975880 1.684716144 1.922975281</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">213</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91434122" y3="-0.95486789" z3="-0.68537193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59595167" y3="-1.95224614" z3="-1.55364363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0791369" y3="-0.99751117" z3="-1.41616212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77240869" y3="1.47706399" z3="-1.06959536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28446568" y3="0.31151233" z3="-0.50401353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65439" y3="2.74014714" z3="-1.15361495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00452446" y3="2.73613026" z3="-0.85065265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38130997" y3="4.99675854" z3="-0.37425691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80879779" y3="3.85570073" z3="-0.88496744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7564143" y3="5.87292115" z3="-0.17552518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08665881" y3="1.6152364" z3="-1.67792406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12578293" y3="0.36024722" z3="0.21602183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71009659" y3="0.3879166" z3="-0.63865795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60782136" y3="0.73889754" z3="0.29135873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65720238" y3="-0.85281452" z3="-1.50202563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09371346" y3="-2.47137666" z3="-1.32102152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03537109" y3="-5.49327668" z3="-6.26753531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76599078" y3="-5.05784059" z3="-5.30100852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05954127" y3="-3.91474802" z3="-2.84712947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73121255" y3="-3.6772173" z3="-5.15551953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47626504" y3="-5.88344467" z3="-4.21181029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13749509" y3="-5.3057873" z3="-2.99461456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3870646" y3="-3.07391278" z3="-3.93528555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96413892" y3="-3.01071168" z3="-5.98960782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52773933" y3="-6.97122174" z3="-4.30409075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94916968" y3="-5.93809421" z3="-2.12278753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65400412" y3="-3.36518799" z3="-1.60402157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34476498" y3="-3.84942234" z3="-0.85730508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68579386" y3="-4.85296815" z3="-1.12471973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38066631" y3="-3.54548014" z3="0.59068607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41374499" y3="-3.06584737" z3="3.34852333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68640131" y3="-4.57936067" z3="1.48436904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11059707" y3="-2.26766125" z3="1.08937716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12371213" y3="-2.03008752" z3="2.45949302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69431859" y3="-4.3417034" z3="2.85768262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8762181" y3="-5.58834703" z3="1.10633445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09701095" y3="-1.42871305" z3="0.42416629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1017521" y3="-1.02147217" z3="2.81636916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89940456" y3="-5.16497124" z3="3.54670135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41344343" y3="-2.88292345" z3="4.42706663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33888764" y3="-1.73814904" z3="-3.90715255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46900632" y3="-1.3311231" z3="-3.00490866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33811075" y3="3.71601654" z3="-1.04003004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13220872" y3="-2.98795092" z3="-1.7111607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91948838" y3="-3.16405307" z3="-0.56930068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11291149" y3="-2.28834834" z3="0.36180655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84028537" y3="-0.72272268" z3="0.61828417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70232586" y3="-0.25012132" z3="-0.96728103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53150228" y3="0.45075403" z3="1.2091646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08217661" y3="-1.06503792" z3="1.97590297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40235101" y3="-4.37522435" z3="-0.3327974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11941815" y3="-4.61377496" z3="0.86887478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00260216" y3="0.05375115" z3="-1.76179219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36911133" y3="0.61113968" z3="-0.7784514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32218922" y3="-1.08075333" z3="-1.35159109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64474136" y3="0.55828893" z3="0.55769557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1648266" y3="0.13980817" z3="2.20276196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00011181" y3="1.44689682" z3="1.31572558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54373862" y3="-0.11802212" z3="2.30978297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89498227" y3="-1.73207972" z3="1.63842745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59158706" y3="-1.5282967" z3="2.85052275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05685011" y3="-4.03376137" z3="0.88353275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50895822" y3="-4.35580899" z3="1.74840888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3479035" y3="-5.68787668" z3="0.86496787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27643838" y3="-2.19620733" z3="-0.17429517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1349779" y3="-3.295853" z3="-1.03314434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49281903" y3="-4.45495188" z3="-0.61414074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99672394" y3="-4.5092841" z3="0.68287258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14389334" y3="-3.44857035" z3="1.57187578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77703901" y3="-2.29201378" z3="1.13439846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49118894" y3="-3.22621195" z3="-2.06420825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3526749" y3="-5.29738726" z3="-1.29227041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26074407" y3="-5.69805584" z3="1.11561606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73767263" y3="-3.52842932" z3="2.58125474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86954235" y3="-1.44264027" z3="1.81279953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48911901" y3="4.01999784" z3="0.04869218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85976311" y3="3.80689807" z3="-0.01093023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40138666" y3="3.29086703" z3="-1.18358122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61374482" y3="3.0118876" z3="-2.29789254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24299012" y3="3.22167651" z3="-2.21672052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04052482" y3="4.3797026" z3="0.97878345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5065882" y3="4.01477811" z3="0.84108866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83695323" y3="3.00367455" z3="-1.23780639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07557479" y3="2.62056234" z3="-3.20496306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38772413" y3="2.98048764" z3="-3.07514468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16721862" y3="-5.90775559" z3="2.30401936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76787674" y3="-6.40243656" z3="0.25340961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32162426" y3="2.72749908" z3="-2.31405034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46287103" y3="3.04028928" z3="-0.19490209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61957594" y3="0.16200567" z3="-2.02979416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94503652" y3="1.40957599" z3="-1.89076896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79862057" y3="0.08942958" z3="-2.82192562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27602811" y3="1.19624012" z3="-3.47885671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31307957" y3="-0.87248299" z3="-2.90879545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18045531" y3="1.12822028" z3="-4.08967041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44771112" y3="2.52958043" z3="-2.61069318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58138091" y3="2.42576369" z3="-3.38038461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91702395" y3="3.48203893" z3="-2.55451027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94640648" y3="3.29982326" z3="-3.92708688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58079662" y3="3.90577629" z3="-0.25367783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76345137" y3="5.05756339" z3="-0.0577824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93127585" y3="3.95789998" z3="0.19324757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4504675" y3="5.10261406" z3="0.74882644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56004998" y3="3.07057756" z3="0.09751531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49085123" y3="5.11660524" z3="1.08570879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33349546" y3="6.23206064" z3="0.50671722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64962537" y3="6.26068513" z3="0.89581781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69690758" y3="7.1125704" z3="0.63675766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07660836" y3="7.16771586" z3="1.33267737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34818127" y3="-3.93712266" z3="-2.87322656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52880717" y3="-4.97260934" z3="-2.54642614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22082013" y3="-3.61511983" z3="-3.47210074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47296406" y3="-3.93084354" z3="-3.54218268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69500965" y3="-1.60042309" z3="-2.09547593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43201201" y3="-1.12666338" z3="-2.76917483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53046534" y3="-0.93847088" z3="-1.23089304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74575981" y3="-1.64373317" z3="-2.6533157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9143,-.9549,-.6854;6.596,-1.9522,-1.5536;6.0791,-.9975,-1.4162;4.7724,1.4771,-1.0696;4.2845,.3115,-.504;2.6544,2.7401,-1.1536;4.0045,2.7361,-.8507;2.3813,4.9968,-.3743;1.8088,3.8557,-.885;1.7564,5.8729,-.1755;2.0867,1.6152,-1.6779;3.1258,.3602,.216;1.7101,.3879,-.6387;.6078,.7389,.2914;1.6572,-.8528,-1.502;1.0937,-2.4714,-1.321;2.0354,-5.4933,-6.2675;1.766,-5.0578,-5.301;1.0595,-3.9147,-2.8471;1.7312,-3.6772,-5.1555;1.4763,-5.8834,-4.2118;1.1375,-5.3058,-2.9946;1.3871,-3.0739,-3.9353;1.9641,-3.0107,-5.9896;1.5277,-6.9712,-4.3041;.9492,-5.9381,-2.1228;.654,-3.3652,-1.604;-.3448,-3.8494,-.8573;-.6858,-4.853,-1.1247;-.3807,-3.5455,.5907;-.4137,-3.0658,3.3485;-.6864,-4.5794,1.4844;-.1106,-2.2677,1.0894;-.1237,-2.0301,2.4595;-.6943,-4.3417,2.8577;-.8762,-5.5883,1.1063;.097,-1.4287,.4242;.1018,-1.0215,2.8164;-.8994,-5.165,3.5467;-.4134,-2.8829,4.4271;1.3389,-1.7381,-3.9072;1.469,-1.3311,-3.0049;.3381,3.716,-1.04;-2.1322,-2.988,-1.7112;-2.9195,-3.1641,-.5693;-3.1129,-2.2883,.3618;-3.8403,-.7227,.6183;-4.7023,-.2501,-.9673;-2.5315,.4508,1.2092;-5.0822,-1.065,1.9759;-3.4024,-4.3752,-.3328;-4.1194,-4.6138,.8689;-4.0026,.0538,-1.7618;-5.3691,.6111,-.7785;-5.3222,-1.0808,-1.3516;-1.6447,.5583,.5577;-2.1648,.1398,2.2028;-3.0001,1.4469,1.3157;-5.5437,-.118,2.3098;-5.895,-1.7321,1.6384;-4.5916,-1.5283,2.8505;-5.0569,-4.0338,.8835;-3.509,-4.3558,1.7484;-4.3479,-5.6879,.865;4.2764,-2.1962,-.1743;4.135,-3.2959,-1.0331;3.4928,-4.455,-.6141;2.9967,-4.5093,.6829;3.1439,-3.4486,1.5719;3.777,-2.292,1.1344;4.4912,-3.2262,-2.0642;3.3527,-5.2974,-1.2923;2.2607,-5.6981,1.1156;2.7377,-3.5284,2.5813;3.8695,-1.4426,1.8128;-.4891,4.02,.0487;-1.8598,3.8069,-.0109;-2.4014,3.2909,-1.1836;-1.6137,3.0119,-2.2979;-.243,3.2217,-2.2167;-.0405,4.3797,.9788;-2.5066,4.0148,.8411;-3.837,3.0037,-1.2378;-2.0756,2.6206,-3.205;.3877,2.9805,-3.0751;2.1672,-5.9078,2.304;1.7679,-6.4024,.2534;-4.3216,2.7275,-2.3141;-4.4629,3.0403,-.1949;6.6196,.162,-2.0298;5.945,1.4096,-1.8908;7.7986,.0894,-2.8219;8.276,1.1962,-3.4789;8.3131,-.8725,-2.9088;9.1805,1.1282,-4.0897;6.4477,2.5296,-2.6107;7.5814,2.4258,-3.3804;5.917,3.482,-2.5545;7.9464,3.2998,-3.9271;4.5808,3.9058,-.2537;3.7635,5.0576,-.0578;5.9313,3.9579,.1932;6.4505,5.1026,.7488;6.56,3.0706,.0975;7.4909,5.1166,1.0857;4.3335,6.2321,.5067;5.6496,6.2607,.8958;3.6969,7.1126,.6368;6.0766,7.1677,1.3327;-2.3482,-3.9371,-2.8732;-2.5288,-4.9726,-2.5464;-3.2208,-3.6151,-3.4721;-1.473,-3.9308,-3.5422;-1.695,-1.6004,-2.0955;-2.432,-1.1267,-2.7692;-1.5305,-.9385,-1.2309;-.7458,-1.6437,-2.6533;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925487519</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002020032463 0.000246355674 0.020701944522 0.005335741566</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057076825 -0.000296970 0.000074245 0.000337629 0.000384762 0.000416143 0.000468427 0.000523914 0.000638397 0.000717531 0.000892977 0.000988422 0.001147659 0.001196168 0.001343149 0.001402952 0.001506514 0.001788895 0.002238316 0.002372875 0.002472397 0.002615032 0.002849932 0.003502316 0.003604276 0.003887518 0.004349426 0.004667082 0.004801975 0.005032192 0.005213861 0.005337476 0.006255462 0.006353268 0.006822893 0.006966616 0.007205771 0.007464744 0.008177607 0.008683207 0.008908320 0.009409511 0.009780017 0.010395457 0.011129504 0.011341789 0.011757496 0.012523656 0.013267649 0.013676416 0.013976111 0.014591530 0.014927119 0.015491041 0.015825392 0.016595728 0.017143465 0.018559741 0.018854630 0.019435818 0.020344877 0.020625507 0.021456269 0.021869039 0.022363733 0.022770687 0.023437720 0.023868561 0.024514330 0.025870864 0.026576240 0.026920305 0.027248204 0.027600709 0.028195690 0.029092217 0.030862024 0.031508302 0.032987333 0.034065768 0.034630400 0.035931136 0.039019353 0.039486703 0.041954914 0.045395308 0.046092168 0.046981682 0.048713451 0.049679177 0.049859211 0.050742919 0.051534055 0.052171258 0.052287028 0.052403947 0.052737609 0.053457755 0.054922143 0.056019160 0.056377675 0.056705471 0.056999935 0.057292445 0.057759052 0.058575762 0.059224839 0.059699047 0.061243029 0.062022486 0.062795732 0.064221156 0.064531492 0.064996050 0.065967925 0.067444048 0.067930750 0.068931152 0.070519497 0.072080929 0.072603729 0.072898308 0.073390748 0.075624024 0.078556615 0.080819451 0.081569999 0.083332518 0.084665297 0.088489899 0.088998684 0.089366684 0.089848135 0.091304839 0.093311171 0.094575801 0.095477375 0.096183754 0.096839212 0.098404384 0.100119370 0.100610026 0.102619815 0.103725261 0.104161593 0.106365806 0.108770922 0.110775945 0.112201003 0.112805964 0.113710347 0.114698312 0.116908592 0.117147816 0.118594665 0.119234989 0.120568452 0.122066672 0.125189076 0.125610345 0.128474395 0.128945257 0.130878150 0.133538993 0.136331794 0.137705317 0.138645511 0.139614065 0.140392403 0.143471836 0.144622386 0.145894145 0.146754526 0.151916421 0.153598994 0.154306380 0.160821704 0.161486681 0.168465946 0.171406163 0.175886201 0.178874370 0.181506096 0.184297316 0.188936500 0.189809645 0.191804432 0.201219248 0.202171443 0.206276044 0.206947315 0.207255639 0.212263773 0.212545664 0.214420069 0.216701099 0.219351271 0.220510607 0.220990114 0.224539887 0.225433793 0.231845936 0.234538960 0.235385733 0.238410139 0.246444604 0.249221960 0.251655435 0.256524644 0.257188917 0.258251878 0.262491046 0.271566158 0.282859126 0.291988600 0.299852347 0.300083290 0.300997492 0.307085855 0.307774231 0.309792458 0.319821185 0.321339450 0.326399902 0.330081394 0.336004388 0.347725178 0.352019632 0.355624212 0.360486742 0.361607873 0.364107537 0.384494934 0.406907825 0.414385910 0.430239578 0.432596234 0.435274717 0.450780488 0.464619329 0.475455435 0.478813334 0.480329845 0.486668436 0.498893838 0.503864081 0.514575386 0.517163356 0.543775732 0.566909493 0.567664491 0.586538476 0.592182905 0.605692620 0.644149608 0.645335560 0.667957722 0.675590731 0.687366166 0.703565292 0.704344276 0.705793975 0.709312070 0.717122813 0.733988211 0.737975608 0.739580759 0.747875978 0.750770469 0.771609154 0.775968058 0.808758910 0.821791677 0.823892573 0.828911288 0.834179302 0.847129578 0.849310869 0.851395212 0.854503948 0.863281174 0.867470550 0.875648346 0.887432008 0.890996681 0.892390247 0.893405208 0.901172872 0.910318415 0.918176559 0.924008054 0.924717196 0.931850259 0.935568489 0.956044405 0.963656798 0.965160199 0.970084801 0.978087067 0.982399785 0.998615881 1.012816012 1.015312180 1.021365820 1.040074649 1.055068710 1.070205002 1.072394064 1.079409913 1.087321847 1.105759761 1.110343085 1.112443972 1.118772846 1.122525533 1.123551294 1.141854745 1.148728431 1.161743038 1.170035380 1.176687548 1.187212867 1.200742662 1.221258890 1.231810005 1.258100269 1.296399415 1.298118650 1.314699855 1.326479962 1.327263040 1.330188034 1.331364820 1.334706525 1.342101628 1.348655538 1.365388627 1.379960446 1.381284398 1.381804448 1.428754925 1.516681998 1.557976898 1.684716471 1.922977107</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">214</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91582426" y3="-0.95505246" z3="-0.68328237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59907359" y3="-1.95197126" z3="-1.54882133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08213483" y3="-0.99725664" z3="-1.41160452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77460859" y3="1.47728532" z3="-1.06582488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28549757" y3="0.31117055" z3="-0.50232631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6564746" y3="2.73984319" z3="-1.15567803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00577994" y3="2.73610766" z3="-0.84887626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38173485" y3="4.99704454" z3="-0.38073106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81058065" y3="3.85554595" z3="-0.89173657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75633854" y3="5.87344859" z3="-0.18443414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08993932" y3="1.61471197" z3="-1.68063692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12512553" y3="0.35894171" z3="0.21505204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71145477" y3="0.38659394" z3="-0.64279597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60709492" y3="0.73621518" z3="0.28544804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66061679" y3="-0.85341541" z3="-1.5075213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09261493" y3="-2.46975293" z3="-1.32445659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02353821" y3="-5.49247226" z3="-6.27244166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75626156" y3="-5.05688841" z3="-5.30542018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05538784" y3="-3.91351264" z3="-2.8501462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72130676" y3="-3.67620806" z3="-5.16020927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46948902" y3="-5.8823613" z3="-4.21533339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13348011" y3="-5.30456132" z3="-2.99746813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37990043" y3="-3.07277587" z3="-3.93930743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95199575" y3="-3.00980562" z3="-5.99501497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52118104" y3="-6.97017573" z3="-4.3074396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94740553" y3="-5.93669677" z3="-2.12499068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65242324" y3="-3.36422053" z3="-1.60610756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34608581" y3="-3.84746721" z3="-0.85874488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68770206" y3="-4.85110024" z3="-1.12546546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3800495" y3="-3.5432368" z3="0.58943771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40886322" y3="-3.06417109" z3="3.34738103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68426919" y3="-4.57711382" z3="1.48345559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1105089" y3="-2.26465532" z3="1.08757827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12172549" y3="-2.02742318" z3="2.45772015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69019055" y3="-4.33966376" z3="2.85675955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87477568" y3="-5.58569014" z3="1.10535339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09549965" y3="-1.42522222" z3="0.42249652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10374057" y3="-1.01875395" z3="2.81444449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89290396" y3="-5.16356381" z3="3.546562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4067739" y3="-2.88170967" z3="4.42594166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33104335" y3="-1.73691641" z3="-3.91137633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4648214" y3="-1.32987791" z3="-3.00956847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34019732" y3="3.71519668" z3="-1.04979778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13434984" y3="-2.98551694" z3="-1.71012775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9199445" y3="-3.16356902" z3="-0.5670468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11193913" y3="-2.28879835" z3="0.36527028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8398529" y3="-0.72398777" z3="0.62432708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71229586" y3="-0.25627571" z3="-0.95693155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53128261" y3="0.45422565" z3="1.20574041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07176102" y3="-1.06661601" z3="1.99060103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40228249" y3="-4.37517881" z3="-0.33114073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11769114" y3="-4.61513412" z3="0.87142314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01813764" y3="0.04063468" z3="-1.75859951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37298564" y3="0.60847887" z3="-0.76541494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33864989" y3="-1.0862137" z3="-1.33093735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64776782" y3="0.56077947" z3="0.5504756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16020444" y3="0.14783714" z3="2.19963685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00234771" y3="1.44882652" z3="1.31177924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53225244" y3="-0.12032376" z3="2.32753413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88557734" y3="-1.73535734" z3="1.6591294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57418645" y3="-1.52865664" z3="2.86157219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05445463" y3="-4.03457764" z3="0.88915264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50580841" y3="-4.35997808" z3="1.75016548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3470323" y3="-5.68904776" z3="0.86632844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27684" y3="-2.19671974" z3="-0.17436286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13444558" y3="-3.2947679" z3="-1.03498216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49133865" y3="-4.45386826" z3="-0.61777736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99558127" y3="-4.5099078" z3="0.67931692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14348778" y3="-3.45078226" z3="1.5699226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77736327" y3="-2.2941284" z3="1.13413385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49067538" y3="-3.22366463" z3="-2.06592996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35003415" y3="-5.29468139" z3="-1.29731207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25933591" y3="-5.69879596" z3="1.11049674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73729505" y3="-3.5318329" z3="2.57922345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87060103" y3="-1.44595738" z3="1.81377089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48865344" y3="4.01880596" z3="0.03959785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8596037" y3="3.80597848" z3="-0.02383928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39849209" y3="3.28542546" z3="-1.19500302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60861374" y3="3.00372924" z3="-2.30669098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23875069" y3="3.2176052" z3="-2.22636989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04327408" y3="4.38298221" z3="0.96780089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.507133" y3="4.0131682" z3="0.82961118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8337912" y3="2.99607888" z3="-1.25030003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06918239" y3="2.60903813" z3="-3.21329338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39446809" y3="2.97270098" z3="-3.07964318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16686678" y3="-5.9106057" z3="2.29863739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7652027" y3="-6.40119565" z3="0.24742733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31633171" y3="2.71282751" z3="-2.32572847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4616141" y3="3.0381082" z3="-0.2087602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62397749" y3="0.16276884" z3="-2.02306112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9492719" y3="1.4103894" z3="-1.88430968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80464007" y3="0.09051221" z3="-2.81294245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28353075" y3="1.19770059" z3="-3.46817881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31911199" y3="-0.87151578" z3="-2.89955173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18915042" y3="1.12984905" z3="-4.07740863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45376986" y3="2.53097301" z3="-2.60213305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58894137" y3="2.42743371" z3="-3.36983591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92336962" y3="3.4837877" z3="-2.54564499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95522806" y3="3.30190531" z3="-3.91507221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58031402" y3="3.9062333" z3="-0.25135856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76264079" y3="5.05813458" z3="-0.05945133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92925295" y3="3.95866772" z3="0.20002691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44697597" y3="5.10372817" z3="0.75617772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55800642" y3="3.07123594" z3="0.10721395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48627395" y3="5.11792452" z3="1.09647323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33093115" y3="6.23295739" z3="0.50623939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64579652" y3="6.2618276" z3="0.89965066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69392919" y3="7.11366479" z3="0.63437618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07140688" y3="7.16912046" z3="1.33728123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35152251" y3="-3.93312475" z3="-2.87305056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52998864" y3="-4.96945231" z3="-2.54783883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22618167" y3="-3.61178068" z3="-3.47010265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47741287" y3="-3.92431159" z3="-3.54326035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69911982" y3="-1.59675" z3="-2.09332956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4374532" y3="-1.12286774" z3="-2.76522298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53366659" y3="-0.93519215" z3="-1.22840901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75051928" y3="-1.63865651" z3="-2.65227184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9158,-.9551,-.6833;6.5991,-1.952,-1.5488;6.0821,-.9973,-1.4116;4.7746,1.4773,-1.0658;4.2855,.3112,-.5023;2.6565,2.7398,-1.1557;4.0058,2.7361,-.8489;2.3817,4.997,-.3807;1.8106,3.8555,-.8917;1.7563,5.8734,-.1844;2.0899,1.6147,-1.6806;3.1251,.3589,.2151;1.7115,.3866,-.6428;.6071,.7362,.2854;1.6606,-.8534,-1.5075;1.0926,-2.4698,-1.3245;2.0235,-5.4925,-6.2724;1.7563,-5.0569,-5.3054;1.0554,-3.9135,-2.8501;1.7213,-3.6762,-5.1602;1.4695,-5.8824,-4.2153;1.1335,-5.3046,-2.9975;1.3799,-3.0728,-3.9393;1.952,-3.0098,-5.995;1.5212,-6.9702,-4.3074;.9474,-5.9367,-2.125;.6524,-3.3642,-1.6061;-.3461,-3.8475,-.8587;-.6877,-4.8511,-1.1255;-.38,-3.5432,.5894;-.4089,-3.0642,3.3474;-.6843,-4.5771,1.4835;-.1105,-2.2647,1.0876;-.1217,-2.0274,2.4577;-.6902,-4.3397,2.8568;-.8748,-5.5857,1.1054;.0955,-1.4252,.4225;.1037,-1.0188,2.8144;-.8929,-5.1636,3.5466;-.4068,-2.8817,4.4259;1.331,-1.7369,-3.9114;1.4648,-1.3299,-3.0096;.3402,3.7152,-1.0498;-2.1343,-2.9855,-1.7101;-2.9199,-3.1636,-.567;-3.1119,-2.2888,.3653;-3.8399,-.724,.6243;-4.7123,-.2563,-.9569;-2.5313,.4542,1.2057;-5.0718,-1.0666,1.9906;-3.4023,-4.3752,-.3311;-4.1177,-4.6151,.8714;-4.0181,.0406,-1.7586;-5.373,.6085,-.7654;-5.3386,-1.0862,-1.3309;-1.6478,.5608,.5505;-2.1602,.1478,2.1996;-3.0023,1.4488,1.3118;-5.5323,-.1203,2.3275;-5.8856,-1.7354,1.6591;-4.5742,-1.5287,2.8616;-5.0545,-4.0346,.8892;-3.5058,-4.36,1.7502;-4.347,-5.689,.8663;4.2768,-2.1967,-.1744;4.1344,-3.2948,-1.035;3.4913,-4.4539,-.6178;2.9956,-4.5099,.6793;3.1435,-3.4508,1.5699;3.7774,-2.2941,1.1341;4.4907,-3.2237,-2.0659;3.35,-5.2947,-1.2973;2.2593,-5.6988,1.1105;2.7373,-3.5318,2.5792;3.8706,-1.446,1.8138;-.4887,4.0188,.0396;-1.8596,3.806,-.0238;-2.3985,3.2854,-1.195;-1.6086,3.0037,-2.3067;-.2388,3.2176,-2.2264;-.0433,4.383,.9678;-2.5071,4.0132,.8296;-3.8338,2.9961,-1.2503;-2.0692,2.609,-3.2133;.3945,2.9727,-3.0796;2.1669,-5.9106,2.2986;1.7652,-6.4012,.2474;-4.3163,2.7128,-2.3257;-4.4616,3.0381,-.2088;6.624,.1628,-2.0231;5.9493,1.4104,-1.8843;7.8046,.0905,-2.8129;8.2835,1.1977,-3.4682;8.3191,-.8715,-2.8996;9.1892,1.1298,-4.0774;6.4538,2.531,-2.6021;7.5889,2.4274,-3.3698;5.9234,3.4838,-2.5456;7.9552,3.3019,-3.9151;4.5803,3.9062,-.2514;3.7626,5.0581,-.0595;5.9293,3.9587,.2;6.447,5.1037,.7562;6.558,3.0712,.1072;7.4863,5.1179,1.0965;4.3309,6.233,.5062;5.6458,6.2618,.8997;3.6939,7.1137,.6344;6.0714,7.1691,1.3373;-2.3515,-3.9331,-2.8731;-2.53,-4.9695,-2.5478;-3.2262,-3.6118,-3.4701;-1.4774,-3.9243,-3.5433;-1.6991,-1.5967,-2.0933;-2.4375,-1.1229,-2.7652;-1.5337,-.9352,-1.2284;-.7505,-1.6387,-2.6523;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926012608</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001894216291 0.000241913523 0.021572195922 0.005335701902</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057077629 -0.000294373 0.000074708 0.000337622 0.000384727 0.000416210 0.000469523 0.000524479 0.000638452 0.000717717 0.000893031 0.000989968 0.001147817 0.001196685 0.001343229 0.001403231 0.001506626 0.001801755 0.002239421 0.002373572 0.002479191 0.002615383 0.002851029 0.003502881 0.003604431 0.003887292 0.004352577 0.004672212 0.004801976 0.005032443 0.005216240 0.005342123 0.006261743 0.006354902 0.006822991 0.006969123 0.007210160 0.007464728 0.008178049 0.008684535 0.008908960 0.009412978 0.009782038 0.010398152 0.011138030 0.011343098 0.011757711 0.012525892 0.013277203 0.013676506 0.013977358 0.014592847 0.014927092 0.015492136 0.015827831 0.016595807 0.017143434 0.018559942 0.018858040 0.019436080 0.020348016 0.020626993 0.021461373 0.021869038 0.022368045 0.022774519 0.023437929 0.023868838 0.024515950 0.025870891 0.026577491 0.026920621 0.027248600 0.027601029 0.028197048 0.029094727 0.030862320 0.031508751 0.032987153 0.034065706 0.034630764 0.035931327 0.039019690 0.039489019 0.041958086 0.045397131 0.046093017 0.046984934 0.048718320 0.049679698 0.049859466 0.050751771 0.051534058 0.052171564 0.052287044 0.052403947 0.052739994 0.053466621 0.054922179 0.056020086 0.056383995 0.056706135 0.057002743 0.057296985 0.057760514 0.058576546 0.059224976 0.059700430 0.061251747 0.062023431 0.062796214 0.064221154 0.064531570 0.064997439 0.065970528 0.067446363 0.067933496 0.068932967 0.070519474 0.072084136 0.072604298 0.072898559 0.073391813 0.075641068 0.078557070 0.080819988 0.081576520 0.083333191 0.084665861 0.088492691 0.089003261 0.089366739 0.089849007 0.091305032 0.093311306 0.094575878 0.095478115 0.096183964 0.096839404 0.098404860 0.100122314 0.100610935 0.102619816 0.103726428 0.104162011 0.106370092 0.108770868 0.110782978 0.112203894 0.112806066 0.113711575 0.114701046 0.116917030 0.117149310 0.118596645 0.119235829 0.120568463 0.122077378 0.125189914 0.125619555 0.128477187 0.128946258 0.130879448 0.133539573 0.136333709 0.137705253 0.138645791 0.139616208 0.140407222 0.143471982 0.144622669 0.145894264 0.146756677 0.151916792 0.153601001 0.154306937 0.160821541 0.161488822 0.168466231 0.171408939 0.175889729 0.178878703 0.181506874 0.184301869 0.188943254 0.189810062 0.191809433 0.201221846 0.202172454 0.206276057 0.206947832 0.207256083 0.212275407 0.212550592 0.214552730 0.216732508 0.219550725 0.220525040 0.220996442 0.224542406 0.225435614 0.231846006 0.234539046 0.235388288 0.238410394 0.246448666 0.249228115 0.251671627 0.256524723 0.257189084 0.258252157 0.262496413 0.271566331 0.282859290 0.291989879 0.299853726 0.300087472 0.300998014 0.307088605 0.307774761 0.309793409 0.319821634 0.321339639 0.326402648 0.330082053 0.336029503 0.347725267 0.352019732 0.355624395 0.360487142 0.361608423 0.364108322 0.384496226 0.406911381 0.414386068 0.430242785 0.432596094 0.435275665 0.450783237 0.464626123 0.475464996 0.478813408 0.480329943 0.486668432 0.498893843 0.503864291 0.514610518 0.517211752 0.543776076 0.566909559 0.567664507 0.586538589 0.592184450 0.605693129 0.644149595 0.645335860 0.667957827 0.675593267 0.687366506 0.703568159 0.704345556 0.705810887 0.709312226 0.717128943 0.733990234 0.737975736 0.739581288 0.747877161 0.750772897 0.771609200 0.775968319 0.808772887 0.821793976 0.823893614 0.828912189 0.834185268 0.847134060 0.849317086 0.851395264 0.854504039 0.863282205 0.867470561 0.875662385 0.887434293 0.890996834 0.892391211 0.893405586 0.901212090 0.910319203 0.918177754 0.924016493 0.924717924 0.931865265 0.935577810 0.956045432 0.963658061 0.965166602 0.970089946 0.978089865 0.982411016 0.998617178 1.012846395 1.015375641 1.021408801 1.040077977 1.055070092 1.070270646 1.072396529 1.079413170 1.087324578 1.106023431 1.110351929 1.112617038 1.118775390 1.122529103 1.123558932 1.141854994 1.148728491 1.161743296 1.170036690 1.176701583 1.187219905 1.200742669 1.221277222 1.231847833 1.258100269 1.296401906 1.298136030 1.314701056 1.326480390 1.327263137 1.330189248 1.331364897 1.334706520 1.342104520 1.348666255 1.365388527 1.379961508 1.381284547 1.381804516 1.428794164 1.516717582 1.557977477 1.684716664 1.922983138</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">215</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91795625" y3="-0.95479869" z3="-0.68162431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60286859" y3="-1.95167538" z3="-1.54400991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08580529" y3="-0.99691327" z3="-1.40750823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77735492" y3="1.47740214" z3="-1.06420352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28719973" y3="0.31129341" z3="-0.50168462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65897779" y3="2.73880861" z3="-1.15916586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00752308" y3="2.73591143" z3="-0.84927854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38035102" y3="4.99581137" z3="-0.38293726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81113475" y3="3.85391108" z3="-0.895511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75384043" y3="5.87184378" z3="-0.18729667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0947057" y3="1.61316816" z3="-1.68545906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12538639" y3="0.35884379" z3="0.21337031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71335737" y3="0.38644105" z3="-0.64720551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6073911" y3="0.73825631" z3="0.27816239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66376625" y3="-0.85450757" z3="-1.51041995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09223274" y3="-2.46994686" z3="-1.32675245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01085106" y3="-5.49089646" z3="-6.27810391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74592656" y3="-5.05536918" z3="-5.3104079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05059032" y3="-3.91217606" z3="-2.85354068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7118722" y3="-3.67474615" z3="-5.16488261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46123537" y3="-5.88085191" z3="-4.21986614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1279299" y3="-5.30315142" z3="-3.00117978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37329175" y3="-3.07146249" z3="-3.94316335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94100699" y3="-3.00837101" z3="-6.00008106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51228716" y3="-6.96859765" z3="-4.31233734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94319739" y3="-5.935302" z3="-2.12852205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64954925" y3="-3.36245134" z3="-1.60904577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34806191" y3="-3.84549152" z3="-0.85989493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69065269" y3="-4.84883399" z3="-1.12627571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37952092" y3="-3.54156127" z3="0.58836055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40478995" y3="-3.06215651" z3="3.34643558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68262857" y3="-4.57543881" z3="1.48292014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10821186" y3="-2.26377726" z3="1.08636658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11754197" y3="-2.02633867" z3="2.45654987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68666648" y3="-4.33789198" z3="2.85628413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87344215" y3="-5.58442345" z3="1.1054115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09706879" y3="-1.4244631" z3="0.42085356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10878008" y3="-1.01768722" z3="2.81288442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88952959" y3="-5.1612709" z3="3.54586475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40135588" y3="-2.87935696" z3="4.42499946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32488406" y3="-1.73568487" z3="-3.9144342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4621132" y3="-1.32969029" z3="-3.01284041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34130905" y3="3.71208663" z3="-1.05620393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1361945" y3="-2.98222991" z3="-1.70803703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92068009" y3="-3.16196159" z3="-0.56468339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11169242" y3="-2.28918928" z3="0.36964826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84045655" y3="-0.72532284" z3="0.63137425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72349112" y3="-0.26179925" z3="-0.94519161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53046837" y3="0.45623664" z3="1.20379609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06300394" y3="-1.06883837" z3="2.00606052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4026511" y3="-4.37393668" z3="-0.33056762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11713114" y3="-4.61607482" z3="0.87191632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03425583" y3="0.02639854" z3="-1.75466727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37812167" y3="0.60833546" z3="-0.75443747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3579588" y3="-1.09043694" z3="-1.30941988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64904166" y3="0.56314525" z3="0.54496211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15452883" y3="0.15267972" z3="2.19614564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00179349" y3="1.45120917" z3="1.30863478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52336325" y3="-0.12313799" z3="2.34552841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87786215" y3="-1.73932064" z3="1.68070159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55854167" y3="-1.5291731" z3="2.87448998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05477982" y3="-4.0364087" z3="0.89009715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50503532" y3="-4.36043359" z3="1.75096862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34522805" y3="-5.69037494" z3="0.86555123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27771393" y3="-2.19647862" z3="-0.17430015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1342738" y3="-3.29325979" z3="-1.03641066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49042751" y3="-4.45256147" z3="-0.62061049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99527572" y3="-4.51011191" z3="0.67666196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14390319" y3="-3.45206984" z3="1.56858023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77816152" y3="-2.29500293" z3="1.13405242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49044096" y3="-3.22090525" z3="-2.06729105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34847678" y3="-5.29266344" z3="-1.30117942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25893809" y3="-5.69949641" z3="1.10674634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73792403" y3="-3.53432415" z3="2.57787272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87175487" y3="-1.44741825" z3="1.81461807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49046664" y3="4.02043807" z3="0.02768076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86044974" y3="3.80404548" z3="-0.03551703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39687211" y3="3.27970914" z3="-1.20680131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60482519" y3="2.99669277" z3="-2.31696855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23477842" y3="3.21047824" z3="-2.23231196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04603275" y3="4.38612222" z3="0.95727355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51058409" y3="4.01510873" z3="0.81324365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8314836" y3="2.9877339" z3="-1.26376695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06258435" y3="2.59874263" z3="-3.22318082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39943642" y3="2.96571413" z3="-3.08670006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16651012" y3="-5.91247803" z3="2.29466724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76475263" y3="-6.40112329" z3="0.24308446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3109146" y3="2.69719785" z3="-2.33849119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46180449" y3="3.03509582" z3="-0.22398135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62916937" y3="0.16334976" z3="-2.01717912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95402798" y3="1.41082469" z3="-1.87970678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81190969" y3="0.09162193" z3="-2.80393116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29261997" y3="1.19927175" z3="-3.45704014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32662703" y3="-0.87031527" z3="-2.88975164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19992192" y3="1.13189098" z3="-4.06373057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46034769" y3="2.5317751" z3="-2.59561284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59772885" y3="2.42886143" z3="-3.35998225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92965499" y3="3.48436346" z3="-2.54044952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9655404" y3="3.30373127" z3="-3.90352444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57985986" y3="3.90630617" z3="-0.25008802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76076569" y3="5.05774124" z3="-0.05928911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92788789" y3="3.9594878" z3="0.20404298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44342215" y3="5.1047786" z3="0.76180074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55770066" y3="3.07245359" z3="0.11172113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48202557" y3="5.11953832" z3="1.10423937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32703276" y3="6.23290943" z3="0.50769704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64103977" y3="6.26247165" z3="0.90396587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68924611" y3="7.11318846" z3="0.63392195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06510679" y3="7.16997791" z3="1.34267732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35499514" y3="-3.92798301" z3="-2.87242506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53340252" y3="-4.96472886" z3="-2.54855144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22988796" y3="-3.6049851" z3="-3.46735995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48198092" y3="-3.91851854" z3="-3.54420971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70018508" y3="-1.59343081" z3="-2.08965545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43798842" y3="-1.11818763" z3="-2.76156469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53519469" y3="-0.93334375" z3="-1.22371521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75159348" y3="-1.63542934" z3="-2.6488063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.918,-.9548,-.6816;6.6029,-1.9517,-1.544;6.0858,-.9969,-1.4075;4.7774,1.4774,-1.0642;4.2872,.3113,-.5017;2.659,2.7388,-1.1592;4.0075,2.7359,-.8493;2.3804,4.9958,-.3829;1.8111,3.8539,-.8955;1.7538,5.8718,-.1873;2.0947,1.6132,-1.6855;3.1254,.3588,.2134;1.7134,.3864,-.6472;.6074,.7383,.2782;1.6638,-.8545,-1.5104;1.0922,-2.4699,-1.3268;2.0109,-5.4909,-6.2781;1.7459,-5.0554,-5.3104;1.0506,-3.9122,-2.8535;1.7119,-3.6747,-5.1649;1.4612,-5.8809,-4.2199;1.1279,-5.3032,-3.0012;1.3733,-3.0715,-3.9432;1.941,-3.0084,-6.0001;1.5123,-6.9686,-4.3123;.9432,-5.9353,-2.1285;.6495,-3.3625,-1.609;-.3481,-3.8455,-.8599;-.6907,-4.8488,-1.1263;-.3795,-3.5416,.5884;-.4048,-3.0622,3.3464;-.6826,-4.5754,1.4829;-.1082,-2.2638,1.0864;-.1175,-2.0263,2.4565;-.6867,-4.3379,2.8563;-.8734,-5.5844,1.1054;.0971,-1.4245,.4209;.1088,-1.0177,2.8129;-.8895,-5.1613,3.5459;-.4014,-2.8794,4.425;1.3249,-1.7357,-3.9144;1.4621,-1.3297,-3.0128;.3413,3.7121,-1.0562;-2.1362,-2.9822,-1.708;-2.9207,-3.162,-.5647;-3.1117,-2.2892,.3696;-3.8405,-.7253,.6314;-4.7235,-.2618,-.9452;-2.5305,.4562,1.2038;-5.063,-1.0688,2.0061;-3.4027,-4.3739,-.3306;-4.1171,-4.6161,.8719;-4.0343,.0264,-1.7547;-5.3781,.6083,-.7544;-5.358,-1.0904,-1.3094;-1.649,.5631,.545;-2.1545,.1527,2.1961;-3.0018,1.4512,1.3086;-5.5234,-.1231,2.3455;-5.8779,-1.7393,1.6807;-4.5585,-1.5292,2.8745;-5.0548,-4.0364,.8901;-3.505,-4.3604,1.751;-4.3452,-5.6904,.8656;4.2777,-2.1965,-.1743;4.1343,-3.2933,-1.0364;3.4904,-4.4526,-.6206;2.9953,-4.5101,.6767;3.1439,-3.4521,1.5686;3.7782,-2.295,1.1341;4.4904,-3.2209,-2.0673;3.3485,-5.2927,-1.3012;2.2589,-5.6995,1.1067;2.7379,-3.5343,2.5779;3.8718,-1.4474,1.8146;-.4905,4.0204,.0277;-1.8604,3.804,-.0355;-2.3969,3.2797,-1.2068;-1.6048,2.9967,-2.317;-.2348,3.2105,-2.2323;-.046,4.3861,.9573;-2.5106,4.0151,.8132;-3.8315,2.9877,-1.2638;-2.0626,2.5987,-3.2232;.3994,2.9657,-3.0867;2.1665,-5.9125,2.2947;1.7648,-6.4011,.2431;-4.3109,2.6972,-2.3385;-4.4618,3.0351,-.224;6.6292,.1633,-2.0172;5.954,1.4108,-1.8797;7.8119,.0916,-2.8039;8.2926,1.1993,-3.457;8.3266,-.8703,-2.8898;9.1999,1.1319,-4.0637;6.4603,2.5318,-2.5956;7.5977,2.4289,-3.36;5.9297,3.4844,-2.5404;7.9655,3.3037,-3.9035;4.5799,3.9063,-.2501;3.7608,5.0577,-.0593;5.9279,3.9595,.204;6.4434,5.1048,.7618;6.5577,3.0725,.1117;7.482,5.1195,1.1042;4.327,6.2329,.5077;5.641,6.2625,.904;3.6892,7.1132,.6339;6.0651,7.17,1.3427;-2.355,-3.928,-2.8724;-2.5334,-4.9647,-2.5486;-3.2299,-3.605,-3.4674;-1.482,-3.9185,-3.5442;-1.7002,-1.5934,-2.0897;-2.438,-1.1182,-2.7616;-1.5352,-.9333,-1.2237;-.7516,-1.6354,-2.6488;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925647022</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001717199452 0.000230987640 0.020831550883 0.005316207859</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057078188 -0.000254630 0.000075569 0.000337576 0.000384724 0.000416203 0.000470392 0.000524520 0.000638669 0.000718719 0.000893350 0.000990091 0.001148108 0.001196644 0.001343330 0.001404039 0.001506578 0.001805748 0.002241012 0.002377260 0.002485404 0.002615509 0.002851519 0.003502754 0.003604704 0.003887969 0.004354887 0.004676040 0.004802183 0.005034466 0.005218186 0.005344555 0.006267924 0.006356042 0.006822802 0.006971647 0.007213967 0.007465667 0.008178681 0.008685865 0.008908932 0.009415847 0.009782407 0.010399131 0.011143524 0.011342737 0.011758234 0.012526664 0.013289379 0.013676475 0.013977382 0.014595257 0.014927351 0.015493044 0.015828252 0.016595883 0.017143492 0.018560028 0.018861510 0.019436283 0.020350180 0.020627168 0.021462745 0.021869364 0.022371946 0.022777750 0.023437943 0.023869425 0.024516660 0.025870918 0.026577819 0.026920799 0.027249325 0.027601543 0.028197990 0.029095189 0.030862322 0.031509113 0.032988358 0.034065678 0.034631700 0.035931392 0.039020031 0.039491336 0.041960940 0.045398134 0.046096371 0.046990090 0.048724451 0.049680163 0.049859531 0.050760762 0.051534072 0.052171651 0.052287053 0.052403974 0.052741394 0.053474622 0.054922322 0.056021558 0.056389915 0.056706589 0.057004881 0.057299676 0.057760951 0.058577936 0.059225038 0.059700997 0.061254827 0.062024675 0.062796597 0.064221268 0.064531641 0.064997831 0.065977659 0.067446826 0.067935744 0.068933672 0.070519508 0.072086725 0.072604443 0.072898698 0.073392744 0.075649491 0.078558124 0.080820671 0.081581990 0.083333714 0.084666932 0.088492279 0.089006972 0.089366883 0.089848985 0.091305169 0.093311533 0.094575954 0.095478618 0.096184104 0.096839712 0.098405351 0.100127033 0.100612315 0.102619824 0.103726970 0.104162489 0.106372108 0.108770907 0.110790617 0.112205847 0.112806360 0.113713201 0.114704078 0.116921938 0.117150608 0.118597584 0.119238816 0.120568459 0.122083889 0.125190169 0.125629149 0.128480079 0.128947988 0.130882339 0.133539858 0.136333958 0.137705333 0.138646461 0.139618506 0.140418543 0.143472079 0.144622930 0.145894213 0.146759443 0.151917121 0.153603462 0.154307517 0.160822986 0.161491903 0.168466575 0.171411696 0.175894426 0.178886512 0.181508010 0.184306482 0.188948988 0.189811052 0.191814779 0.201224757 0.202174046 0.206276143 0.206947992 0.207256199 0.212281912 0.212554459 0.214676788 0.216780372 0.219732207 0.220544027 0.220999166 0.224543856 0.225438416 0.231846039 0.234539074 0.235391485 0.238411170 0.246448843 0.249229041 0.251684701 0.256524728 0.257189089 0.258252511 0.262501197 0.271566427 0.282859293 0.291990241 0.299857138 0.300088996 0.300998117 0.307090401 0.307775474 0.309795164 0.319823767 0.321339652 0.326404030 0.330082849 0.336053976 0.347725417 0.352020042 0.355624431 0.360487815 0.361608565 0.364108525 0.384497520 0.406914938 0.414386248 0.430246705 0.432596696 0.435276362 0.450785747 0.464630237 0.475480622 0.478813425 0.480329955 0.486671272 0.498893854 0.503864569 0.514646800 0.517250743 0.543776174 0.566909589 0.567664638 0.586538693 0.592185181 0.605693306 0.644149568 0.645336172 0.667958282 0.675594720 0.687366733 0.703570299 0.704346969 0.705858935 0.709312546 0.717134333 0.733993961 0.737975876 0.739583519 0.747880666 0.750773846 0.771609210 0.775968877 0.808788561 0.821795424 0.823895503 0.828913012 0.834189112 0.847137579 0.849323630 0.851395476 0.854504597 0.863282797 0.867470564 0.875675847 0.887435259 0.890997936 0.892392677 0.893407273 0.901253750 0.910319707 0.918183214 0.924027290 0.924718230 0.931876413 0.935581963 0.956046592 0.963657980 0.965172052 0.970091763 0.978093431 0.982425756 0.998618587 1.012874917 1.015430867 1.021442363 1.040081187 1.055070629 1.070318169 1.072400458 1.079415663 1.087326940 1.106246818 1.110357792 1.112781105 1.118777185 1.122533154 1.123569164 1.141855004 1.148728758 1.161743527 1.170040397 1.176721818 1.187225747 1.200742717 1.221300492 1.231899593 1.258100295 1.296405168 1.298147442 1.314702327 1.326481185 1.327264493 1.330190473 1.331365040 1.334706679 1.342106195 1.348677472 1.365389267 1.379962179 1.381285097 1.381804646 1.428841110 1.516720431 1.557977805 1.684716713 1.922984205</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">216</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91912558" y3="-0.95487451" z3="-0.68036204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60601185" y3="-1.95117584" z3="-1.53933053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0886493" y3="-0.99650361" z3="-1.40343018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77918807" y3="1.47766979" z3="-1.06156895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28791603" y3="0.31105541" z3="-0.50096769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66074269" y3="2.73880784" z3="-1.1614452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00853167" y3="2.7360406" z3="-0.84796982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38036924" y3="4.99587327" z3="-0.38817255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81247688" y3="3.85382043" z3="-0.90170466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75351664" y3="5.87184728" z3="-0.19567076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09790928" y3="1.6130189" z3="-1.68899027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12454221" y3="0.35778254" z3="0.21161815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71434202" y3="0.38582264" z3="-0.65197881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60654937" y3="0.73719569" z3="0.27149947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66635058" y3="-0.85463878" z3="-1.51623957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09114827" y3="-2.46805647" z3="-1.33014589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99769856" y3="-5.49053962" z3="-6.28294713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73530815" y3="-5.05478729" z3="-5.3146615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04645375" y3="-3.91107406" z3="-2.85624682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70079705" y3="-3.67401387" z3="-5.16966933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45437679" y3="-5.88010172" z3="-4.22290266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12428417" y3="-5.30213377" z3="-3.00345998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3654638" y3="-3.07049126" z3="-3.94718172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9270636" y3="-3.0077661" z3="-6.00585392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50587931" y3="-6.96793736" z3="-4.31502976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94237407" y3="-5.9340082" z3="-2.12986357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64820176" y3="-3.36158321" z3="-1.61073012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34908039" y3="-3.84360647" z3="-0.86083193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69251218" y3="-4.84679865" z3="-1.12683459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37849651" y3="-3.53973557" z3="0.58757016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39965247" y3="-3.06090431" z3="3.34566751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68005946" y3="-4.57373633" z3="1.48231329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10757273" y3="-2.26121578" z3="1.08513587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11505928" y3="-2.02410897" z3="2.45533316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68204695" y3="-4.33649518" z3="2.85569722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87146451" y3="-5.58234998" z3="1.10465375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09631473" y3="-1.42154265" z3="0.4196578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11151979" y3="-1.01559624" z3="2.81170158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88271435" y3="-5.16049655" z3="3.54586089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3945774" y3="-2.87846954" z3="4.42423082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31612281" y3="-1.73457243" z3="-3.91889884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4571171" y3="-1.32828716" z3="-3.01783249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34292275" y3="3.71147041" z3="-1.06552376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13807534" y3="-2.9793519" z3="-1.70648314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92120476" y3="-3.16103195" z3="-0.56238838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11137753" y3="-2.28944912" z3="0.37332891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84003346" y3="-0.72587671" z3="0.63726715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73312519" y3="-0.26683246" z3="-0.93485722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52964388" y3="0.45976397" z3="1.19969304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05265013" y3="-1.06948798" z3="2.02042678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40264693" y3="-4.37345688" z3="-0.32935238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11586076" y3="-4.61719346" z3="0.87366228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04904189" y3="0.01306933" z3="-1.7514564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38124823" y3="0.60764663" z3="-0.74380269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37433119" y3="-1.09441204" z3="-1.28869307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65166884" y3="0.56562315" z3="0.53717959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14945969" y3="0.16058846" z3="2.19224613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00289845" y3="1.45369432" z3="1.3035571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51088975" y3="-0.12406092" z3="2.36263231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86909455" y3="-1.74105371" z3="1.70153315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54144407" y3="-1.52905465" z3="2.8847326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05283523" y3="-4.0370058" z3="0.89459499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50261271" y3="-4.36422601" z3="1.75209268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34487117" y3="-5.69102245" z3="0.86563558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27784402" y3="-2.19679437" z3="-0.17496365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13361366" y3="-3.29229124" z3="-1.03852826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48913741" y3="-4.45168594" z3="-0.6241287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9944505" y3="-4.5106663" z3="0.67328254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14364533" y3="-3.45386411" z3="1.56648249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77833106" y3="-2.29664258" z3="1.13326186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48986587" y3="-3.21881594" z3="-2.06930724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34648106" y3="-5.29074304" z3="-1.30574018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25855261" y3="-5.70065449" z3="1.10236066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73790994" y3="-3.5372339" z3="2.57578276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87267338" y3="-1.45010351" z3="1.81484681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49084845" y3="4.01911795" z3="0.01903537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86090256" y3="3.80254191" z3="-0.04829957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39402229" y3="3.27370708" z3="-1.21844844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59931449" y3="2.98821405" z3="-2.32570396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23050781" y3="3.20664129" z3="-2.24171946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04983096" y3="4.38882348" z3="0.94730861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51220027" y3="4.01297075" z3="0.80129849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82800765" y3="2.97887213" z3="-1.27657397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05526368" y3="2.58688188" z3="-3.2316934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40633198" y3="2.9591242" z3="-3.09194401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16736265" y3="-5.91540075" z3="2.29007167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76350561" y3="-6.40105774" z3="0.23820499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30494935" y3="2.68169413" z3="-2.35076086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46057229" y3="3.03106328" z3="-0.2383793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63342749" y3="0.16425322" z3="-2.01094898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95780817" y3="1.41160328" z3="-1.87447121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.818242" y3="0.09305185" z3="-2.79459237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30048792" y3="1.20099014" z3="-3.4460937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33337669" y3="-0.868717" z3="-2.87928869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20945952" y3="1.13402769" z3="-4.05032063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46571924" y3="2.53281214" z3="-2.58891066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60502929" y3="2.43031573" z3="-3.35053499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93472369" y3="3.48530169" z3="-2.53486914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97400111" y3="3.30533843" z3="-3.8930568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57913414" y3="3.90658799" z3="-0.24745588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7595983" y3="5.05792451" z3="-0.05985987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92571464" y3="3.95996878" z3="0.21084662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43964308" y3="5.10536792" z3="0.76987363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55556557" y3="3.07300961" z3="0.12109006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47712291" y3="5.12033149" z3="1.11563107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32412332" y3="6.23313733" z3="0.50879266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63687225" y3="6.26287438" z3="0.90919509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68583236" y3="7.11337055" z3="0.63350601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05951411" y3="7.1704261" z3="1.349195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35780317" y3="-3.92349392" z3="-2.87180347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5343604" y3="-4.96107489" z3="-2.54946415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23451722" y3="-3.60089881" z3="-3.46516538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48569725" y3="-3.91180827" z3="-3.54452803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70389346" y3="-1.58946596" z3="-2.0866387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44296735" y3="-1.11442038" z3="-2.75695094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53814986" y3="-0.92980573" z3="-1.22055974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75564702" y3="-1.62971272" z3="-2.64644497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9191,-.9549,-.6804;6.606,-1.9512,-1.5393;6.0886,-.9965,-1.4034;4.7792,1.4777,-1.0616;4.2879,.3111,-.501;2.6607,2.7388,-1.1614;4.0085,2.736,-.848;2.3804,4.9959,-.3882;1.8125,3.8538,-.9017;1.7535,5.8718,-.1957;2.0979,1.613,-1.689;3.1245,.3578,.2116;1.7143,.3858,-.652;.6065,.7372,.2715;1.6664,-.8546,-1.5162;1.0911,-2.4681,-1.3301;1.9977,-5.4905,-6.2829;1.7353,-5.0548,-5.3147;1.0465,-3.9111,-2.8562;1.7008,-3.674,-5.1697;1.4544,-5.8801,-4.2229;1.1243,-5.3021,-3.0035;1.3655,-3.0705,-3.9472;1.9271,-3.0078,-6.0059;1.5059,-6.9679,-4.315;.9424,-5.934,-2.1299;.6482,-3.3616,-1.6107;-.3491,-3.8436,-.8608;-.6925,-4.8468,-1.1268;-.3785,-3.5397,.5876;-.3997,-3.0609,3.3457;-.6801,-4.5737,1.4823;-.1076,-2.2612,1.0851;-.1151,-2.0241,2.4553;-.682,-4.3365,2.8557;-.8715,-5.5823,1.1047;.0963,-1.4215,.4197;.1115,-1.0156,2.8117;-.8827,-5.1605,3.5459;-.3946,-2.8785,4.4242;1.3161,-1.7346,-3.9189;1.4571,-1.3283,-3.0178;.3429,3.7115,-1.0655;-2.1381,-2.9794,-1.7065;-2.9212,-3.161,-.5624;-3.1114,-2.2894,.3733;-3.84,-.7259,.6373;-4.7331,-.2668,-.9349;-2.5296,.4598,1.1997;-5.0527,-1.0695,2.0204;-3.4026,-4.3735,-.3294;-4.1159,-4.6172,.8737;-4.049,.0131,-1.7515;-5.3812,.6076,-.7438;-5.3743,-1.0944,-1.2887;-1.6517,.5656,.5372;-2.1495,.1606,2.1922;-3.0029,1.4537,1.3036;-5.5109,-.1241,2.3626;-5.8691,-1.7411,1.7015;-4.5414,-1.5291,2.8847;-5.0528,-4.037,.8946;-3.5026,-4.3642,1.7521;-4.3449,-5.691,.8656;4.2778,-2.1968,-.175;4.1336,-3.2923,-1.0385;3.4891,-4.4517,-.6241;2.9945,-4.5107,.6733;3.1436,-3.4539,1.5665;3.7783,-2.2966,1.1333;4.4899,-3.2188,-2.0693;3.3465,-5.2907,-1.3057;2.2586,-5.7007,1.1024;2.7379,-3.5372,2.5758;3.8727,-1.4501,1.8148;-.4908,4.0191,.019;-1.8609,3.8025,-.0483;-2.394,3.2737,-1.2184;-1.5993,2.9882,-2.3257;-.2305,3.2066,-2.2417;-.0498,4.3888,.9473;-2.5122,4.013,.8013;-3.828,2.9789,-1.2766;-2.0553,2.5869,-3.2317;.4063,2.9591,-3.0919;2.1674,-5.9154,2.2901;1.7635,-6.4011,.2382;-4.3049,2.6817,-2.3508;-4.4606,3.0311,-.2384;6.6334,.1643,-2.0109;5.9578,1.4116,-1.8745;7.8182,.0931,-2.7946;8.3005,1.201,-3.4461;8.3334,-.8687,-2.8793;9.2095,1.134,-4.0503;6.4657,2.5328,-2.5889;7.605,2.4303,-3.3505;5.9347,3.4853,-2.5349;7.974,3.3053,-3.8931;4.5791,3.9066,-.2475;3.7596,5.0579,-.0599;5.9257,3.96,.2108;6.4396,5.1054,.7699;6.5556,3.073,.1211;7.4771,5.1203,1.1156;4.3241,6.2331,.5088;5.6369,6.2629,.9092;3.6858,7.1134,.6335;6.0595,7.1704,1.3492;-2.3578,-3.9235,-2.8718;-2.5344,-4.9611,-2.5495;-3.2345,-3.6009,-3.4652;-1.4857,-3.9118,-3.5445;-1.7039,-1.5895,-2.0866;-2.443,-1.1144,-2.757;-1.5381,-.9298,-1.2206;-.7556,-1.6297,-2.6464;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662924640494</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001491240075 0.000211840388 0.020926075125 0.005298507908</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057078266 -0.000214811 0.000075415 0.000337733 0.000384793 0.000416213 0.000470854 0.000524903 0.000639750 0.000721160 0.000893523 0.000990095 0.001148097 0.001196832 0.001343960 0.001405669 0.001507665 0.001806287 0.002242305 0.002382194 0.002488731 0.002615473 0.002851561 0.003503471 0.003606660 0.003890653 0.004357182 0.004680459 0.004803141 0.005038548 0.005220116 0.005346959 0.006274207 0.006355984 0.006822760 0.006971903 0.007216051 0.007469541 0.008179195 0.008686437 0.008908904 0.009417995 0.009782394 0.010399939 0.011147135 0.011342547 0.011760165 0.012526663 0.013301324 0.013676443 0.013977467 0.014599559 0.014928938 0.015493088 0.015828348 0.016595975 0.017143470 0.018560362 0.018865579 0.019436294 0.020351818 0.020628181 0.021462532 0.021869748 0.022377116 0.022778711 0.023438217 0.023869558 0.024517050 0.025870998 0.026577837 0.026920908 0.027250871 0.027602191 0.028198066 0.029095827 0.030862388 0.031509599 0.032988537 0.034065644 0.034632847 0.035931654 0.039020051 0.039492712 0.041961409 0.045398752 0.046098633 0.046992896 0.048729917 0.049680638 0.049859618 0.050767554 0.051534133 0.052171676 0.052287051 0.052404067 0.052742317 0.053481788 0.054922369 0.056023457 0.056394238 0.056706761 0.057006042 0.057301181 0.057761130 0.058579234 0.059225019 0.059701153 0.061254994 0.062025744 0.062796786 0.064221402 0.064531695 0.064997866 0.065983697 0.067446806 0.067936556 0.068934041 0.070519521 0.072089463 0.072604386 0.072898893 0.073394250 0.075657654 0.078558868 0.080821013 0.081586243 0.083334369 0.084667770 0.088492791 0.089007973 0.089367321 0.089848984 0.091305337 0.093311668 0.094576020 0.095478992 0.096184250 0.096840387 0.098406089 0.100130222 0.100615032 0.102619896 0.103727337 0.104162838 0.106372985 0.108770886 0.110796826 0.112206750 0.112806957 0.113715602 0.114707409 0.116923852 0.117152229 0.118598528 0.119241234 0.120568643 0.122087598 0.125190490 0.125636559 0.128482735 0.128949219 0.130886373 0.133540200 0.136333941 0.137705651 0.138646540 0.139620294 0.140428164 0.143472029 0.144623073 0.145894259 0.146761147 0.151918517 0.153605768 0.154307983 0.160826683 0.161492638 0.168467455 0.171413720 0.175898472 0.178895775 0.181509554 0.184308406 0.188955150 0.189812732 0.191819490 0.201226773 0.202176548 0.206276229 0.206948047 0.207256225 0.212285030 0.212556263 0.214767967 0.216810040 0.219892520 0.220576498 0.221001719 0.224544509 0.225442052 0.231846043 0.234539084 0.235395555 0.238412563 0.246450104 0.249234371 0.251701349 0.256524791 0.257189191 0.258252756 0.262503430 0.271566526 0.282859442 0.291990234 0.299858973 0.300089082 0.300998114 0.307091501 0.307775975 0.309797441 0.319825076 0.321339660 0.326404525 0.330082966 0.336077120 0.347725499 0.352020159 0.355624511 0.360488840 0.361608811 0.364108611 0.384497903 0.406916297 0.414387695 0.430249176 0.432597884 0.435276400 0.450788209 0.464632280 0.475496753 0.478813412 0.480330264 0.486672828 0.498893872 0.503864763 0.514673581 0.517280717 0.543776511 0.566909754 0.567664868 0.586538760 0.592185810 0.605693763 0.644149561 0.645337336 0.667958704 0.675597912 0.687367019 0.703575290 0.704347532 0.705867205 0.709314543 0.717139428 0.733994552 0.737976404 0.739585054 0.747882572 0.750773946 0.771609211 0.775969718 0.808799341 0.821795969 0.823898551 0.828915097 0.834190664 0.847138742 0.849332807 0.851395523 0.854505205 0.863283074 0.867470564 0.875686748 0.887435345 0.890999696 0.892394115 0.893407508 0.901298471 0.910319801 0.918183404 0.924042546 0.924718776 0.931883951 0.935583936 0.956046661 0.963659209 0.965176178 0.970095632 0.978094615 0.982434197 0.998619678 1.012898866 1.015471547 1.021466922 1.040084390 1.055070804 1.070351305 1.072404130 1.079417644 1.087328779 1.106420429 1.110361171 1.112927706 1.118777871 1.122536459 1.123579990 1.141855008 1.148730005 1.161743757 1.170046378 1.176744644 1.187229736 1.200742736 1.221324014 1.231963191 1.258100320 1.296409848 1.298157430 1.314703979 1.326481641 1.327276696 1.330190886 1.331365333 1.334707125 1.342107276 1.348685923 1.365390388 1.379962257 1.381285369 1.381804770 1.428873682 1.516749667 1.557977923 1.684716700 1.922995008</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">217</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92120141" y3="-0.95478888" z3="-0.67847525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60982934" y3="-1.95081444" z3="-1.53437197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09228016" y3="-0.99614145" z3="-1.39906265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7817414" y3="1.47773749" z3="-1.05916655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28936418" y3="0.31090933" z3="-0.50002643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66308071" y3="2.73761199" z3="-1.16435889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.010053" y3="2.73566195" z3="-0.84768289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37892096" y3="4.99436021" z3="-0.39014796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81298782" y3="3.85195008" z3="-0.90514948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75086118" y3="5.87005723" z3="-0.19747019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10229477" y3="1.6115655" z3="-1.6934587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12427556" y3="0.35701005" z3="0.20979558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71615534" y3="0.38469715" z3="-0.65704615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60620236" y3="0.73661413" z3="0.26360362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67028261" y3="-0.85601673" z3="-1.52082922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09068469" y3="-2.46802386" z3="-1.33341754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98524994" y3="-5.48989043" z3="-6.28878473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72510022" y3="-5.05393237" z3="-5.31998527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04154789" y3="-3.90978048" z3="-2.86034142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.6912007" y3="-3.67320991" z3="-5.17503938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44641177" y3="-5.87895163" z3="-4.22758942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11890343" y3="-5.30078278" z3="-3.00751849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35855774" y3="-3.06952068" z3="-3.95194851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9157948" y3="-3.00720741" z3="-6.0117457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49753493" y3="-6.96672468" z3="-4.31977466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93849078" y3="-5.93248691" z3="-2.13364737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64522725" y3="-3.35954605" z3="-1.61452481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35095722" y3="-3.84147139" z3="-0.86263403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6950745" y3="-4.84466599" z3="-1.12790832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37780289" y3="-3.53764462" z3="0.58586996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39510036" y3="-3.05868993" z3="3.34417375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67809792" y3="-4.57162754" z3="1.48117738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10550445" y3="-2.2597677" z3="1.08326214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11092141" y3="-2.02262271" z3="2.45354113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67820128" y3="-4.33429754" z3="2.85459543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86985783" y3="-5.58057515" z3="1.1040637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09716862" y3="-1.41990186" z3="0.41760118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11624286" y3="-1.01398829" z3="2.80951174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8786576" y3="-5.15790872" z3="3.54470341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38850737" y3="-2.87608691" z3="4.42275659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30939876" y3="-1.73368655" z3="-3.92320527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.454028" y3="-1.32829887" z3="-3.02254146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34404269" y3="3.70810379" z3="-1.07172404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14028469" y3="-2.97678766" z3="-1.70501513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92157459" y3="-3.15917618" z3="-0.55965301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10939496" y3="-2.28876247" z3="0.37749494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83973185" y3="-0.72661433" z3="0.64412492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74244263" y3="-0.27273244" z3="-0.92400781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52893716" y3="0.46308712" z3="1.19839386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04333457" y3="-1.07097591" z3="2.03503104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40292728" y3="-4.37176323" z3="-0.32682204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1140794" y3="-4.61660162" z3="0.87728105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06315518" y3="-0.0017182" z3="-1.74763338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38486316" y3="0.60654983" z3="-0.73423609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.39045158" y3="-1.09937953" z3="-1.267767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65265425" y3="0.56889189" z3="0.53280903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14453761" y3="0.16752691" z3="2.19000601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00314601" y3="1.45683375" z3="1.30063839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50261079" y3="-0.12637726" z3="2.37915716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85975742" y3="-1.74524098" z3="1.72172881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52560506" y3="-1.52768665" z3="2.89756783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05158245" y3="-4.03698474" z3="0.89939087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49952234" y3="-4.362948" z3="1.75522059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34228573" y3="-5.69097304" z3="0.86936214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27881092" y3="-2.19687503" z3="-0.17487353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13332125" y3="-3.29077665" z3="-1.0401459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48798416" y3="-4.45025627" z3="-0.62733515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9941001" y3="-4.51104019" z3="0.67031538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14427463" y3="-3.45569838" z3="1.56504064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77941576" y3="-2.29814183" z3="1.13324637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4892269" y3="-3.21572393" z3="-2.07091348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34413689" y3="-5.28797146" z3="-1.31025976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25787347" y3="-5.70119929" z3="1.09808087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73881709" y3="-3.54035301" z3="2.57435287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87422904" y3="-1.45239863" z3="1.81591595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49265548" y3="4.02109993" z3="0.00708076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86196742" y3="3.80145905" z3="-0.06023661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39271144" y3="3.26851047" z3="-1.23014791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59582674" y3="2.98105288" z3="-2.33571537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22660271" y3="3.19890506" z3="-2.24734361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05284967" y3="4.39302335" z3="0.9361898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51568816" y3="4.01569751" z3="0.78515997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82625817" y3="2.97143366" z3="-1.29013514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04923228" y3="2.57623691" z3="-3.24109056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41179751" y3="2.94962419" z3="-3.09684828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16714743" y3="-5.91743796" z3="2.28555393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76218691" y3="-6.40026156" z3="0.23321857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30029725" y3="2.66737595" z3="-2.36342024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46108677" y3="3.02847496" z3="-0.2535598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63847057" y3="0.16497896" z3="-2.00462791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96248652" y3="1.41223664" z3="-1.86892834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8251298" y3="0.09432205" z3="-2.78556819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30900424" y3="1.20281484" z3="-3.43492033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34040223" y3="-0.86747413" z3="-2.86993196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21939256" y3="1.13624998" z3="-4.03710248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47225504" y3="2.53411444" z3="-2.5809789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61347677" y3="2.432243" z3="-3.33979927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94126971" y3="3.48669336" z3="-2.52714306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98390075" y3="3.30784914" z3="-3.88040145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57848262" y3="3.90647209" z3="-0.24570367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75760029" y3="5.05727518" z3="-0.05936289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92404843" y3="3.96064501" z3="0.21550542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43579671" y3="5.10620535" z3="0.77610647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55497764" y3="3.07411268" z3="0.1261262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47255696" y3="5.12172718" z3="1.12405912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32001107" y3="6.23276579" z3="0.51072614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63181031" y3="6.26322527" z3="0.91413984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68093463" y3="7.11255016" z3="0.63368928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05283768" y3="7.17094203" z3="1.35525885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36237242" y3="-3.91990568" z3="-2.87092282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53934701" y3="-4.95754123" z3="-2.54922891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23920245" y3="-3.59574895" z3="-3.46233766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4914387" y3="-3.90830964" z3="-3.54532488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70558903" y3="-1.58699615" z3="-2.0853005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44418841" y3="-1.11125768" z3="-2.7560046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54023435" y3="-0.92767867" z3="-1.21890798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75750922" y3="-1.62799792" z3="-2.64543559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9212,-.9548,-.6785;6.6098,-1.9508,-1.5344;6.0923,-.9961,-1.3991;4.7817,1.4777,-1.0592;4.2894,.3109,-.5;2.6631,2.7376,-1.1644;4.0101,2.7357,-.8477;2.3789,4.9944,-.3901;1.813,3.852,-.9051;1.7509,5.8701,-.1975;2.1023,1.6116,-1.6935;3.1243,.357,.2098;1.7162,.3847,-.657;.6062,.7366,.2636;1.6703,-.856,-1.5208;1.0907,-2.468,-1.3334;1.9852,-5.4899,-6.2888;1.7251,-5.0539,-5.32;1.0415,-3.9098,-2.8603;1.6912,-3.6732,-5.175;1.4464,-5.879,-4.2276;1.1189,-5.3008,-3.0075;1.3586,-3.0695,-3.9519;1.9158,-3.0072,-6.0117;1.4975,-6.9667,-4.3198;.9385,-5.9325,-2.1336;.6452,-3.3595,-1.6145;-.351,-3.8415,-.8626;-.6951,-4.8447,-1.1279;-.3778,-3.5376,.5859;-.3951,-3.0587,3.3442;-.6781,-4.5716,1.4812;-.1055,-2.2598,1.0833;-.1109,-2.0226,2.4535;-.6782,-4.3343,2.8546;-.8699,-5.5806,1.1041;.0972,-1.4199,.4176;.1162,-1.014,2.8095;-.8787,-5.1579,3.5447;-.3885,-2.8761,4.4228;1.3094,-1.7337,-3.9232;1.454,-1.3283,-3.0225;.344,3.7081,-1.0717;-2.1403,-2.9768,-1.705;-2.9216,-3.1592,-.5597;-3.1094,-2.2888,.3775;-3.8397,-.7266,.6441;-4.7424,-.2727,-.924;-2.5289,.4631,1.1984;-5.0433,-1.071,2.035;-3.4029,-4.3718,-.3268;-4.1141,-4.6166,.8773;-4.0632,-.0017,-1.7476;-5.3849,.6065,-.7342;-5.3905,-1.0994,-1.2678;-1.6527,.5689,.5328;-2.1445,.1675,2.19;-3.0031,1.4568,1.3006;-5.5026,-.1264,2.3792;-5.8598,-1.7452,1.7217;-4.5256,-1.5277,2.8976;-5.0516,-4.037,.8994;-3.4995,-4.3629,1.7552;-4.3423,-5.691,.8694;4.2788,-2.1969,-.1749;4.1333,-3.2908,-1.0401;3.488,-4.4503,-.6273;2.9941,-4.511,.6703;3.1443,-3.4557,1.565;3.7794,-2.2981,1.1332;4.4892,-3.2157,-2.0709;3.3441,-5.288,-1.3103;2.2579,-5.7012,1.0981;2.7388,-3.5404,2.5744;3.8742,-1.4524,1.8159;-.4927,4.0211,.0071;-1.862,3.8015,-.0602;-2.3927,3.2685,-1.2301;-1.5958,2.9811,-2.3357;-.2266,3.1989,-2.2473;-.0528,4.393,.9362;-2.5157,4.0157,.7852;-3.8263,2.9714,-1.2901;-2.0492,2.5762,-3.2411;.4118,2.9496,-3.0968;2.1671,-5.9174,2.2856;1.7622,-6.4003,.2332;-4.3003,2.6674,-2.3634;-4.4611,3.0285,-.2536;6.6385,.165,-2.0046;5.9625,1.4122,-1.8689;7.8251,.0943,-2.7856;8.309,1.2028,-3.4349;8.3404,-.8675,-2.8699;9.2194,1.1362,-4.0371;6.4723,2.5341,-2.581;7.6135,2.4322,-3.3398;5.9413,3.4867,-2.5271;7.9839,3.3078,-3.8804;4.5785,3.9065,-.2457;3.7576,5.0573,-.0594;5.924,3.9606,.2155;6.4358,5.1062,.7761;6.555,3.0741,.1261;7.4726,5.1217,1.1241;4.32,6.2328,.5107;5.6318,6.2632,.9141;3.6809,7.1126,.6337;6.0528,7.1709,1.3553;-2.3624,-3.9199,-2.8709;-2.5393,-4.9575,-2.5492;-3.2392,-3.5957,-3.4623;-1.4914,-3.9083,-3.5453;-1.7056,-1.587,-2.0853;-2.4442,-1.1113,-2.756;-1.5402,-.9277,-1.2189;-.7575,-1.628,-2.6454;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662922557287</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001259622679 0.000192536986 0.020048889933 0.005440263388</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057078325 -0.000186994 0.000076019 0.000338241 0.000384726 0.000416141 0.000470749 0.000524739 0.000641005 0.000723698 0.000894832 0.000990223 0.001148205 0.001197566 0.001344880 0.001406727 0.001509876 0.001806291 0.002243611 0.002387785 0.002489587 0.002616923 0.002851746 0.003504414 0.003609513 0.003897043 0.004358435 0.004682294 0.004803564 0.005040531 0.005220658 0.005346679 0.006276233 0.006356045 0.006822552 0.006972793 0.007217195 0.007474630 0.008179710 0.008686907 0.008909047 0.009418740 0.009782682 0.010400580 0.011148562 0.011342266 0.011763683 0.012526617 0.013312663 0.013676478 0.013978308 0.014604109 0.014930888 0.015493437 0.015828641 0.016596134 0.017144368 0.018560835 0.018869969 0.019436365 0.020353161 0.020629220 0.021463161 0.021870548 0.022381293 0.022779128 0.023438266 0.023869759 0.024517299 0.025871204 0.026577902 0.026921025 0.027252417 0.027603555 0.028198044 0.029095887 0.030862725 0.031509736 0.032989087 0.034065805 0.034635028 0.035932016 0.039020029 0.039492750 0.041961481 0.045398779 0.046104383 0.046996665 0.048737174 0.049681141 0.049859726 0.050771985 0.051534261 0.052171694 0.052287050 0.052404128 0.052742787 0.053488071 0.054922568 0.056025532 0.056397509 0.056706860 0.057006964 0.057301939 0.057761566 0.058580441 0.059225053 0.059701217 0.061255055 0.062026669 0.062796862 0.064221985 0.064531801 0.064997928 0.065990647 0.067447047 0.067937195 0.068934133 0.070519622 0.072093861 0.072604715 0.072899024 0.073396011 0.075658589 0.078559959 0.080821541 0.081589219 0.083334741 0.084670058 0.088492638 0.089008493 0.089367907 0.089849275 0.091305430 0.093311805 0.094576068 0.095479100 0.096184467 0.096840962 0.098406744 0.100133803 0.100618365 0.102620083 0.103727412 0.104164575 0.106373355 0.108770927 0.110802093 0.112207243 0.112807959 0.113718711 0.114709900 0.116924384 0.117153275 0.118599255 0.119246432 0.120568985 0.122090109 0.125190767 0.125642070 0.128483902 0.128950575 0.130891937 0.133540333 0.136333954 0.137706585 0.138646693 0.139621532 0.140435483 0.143471964 0.144623784 0.145894226 0.146762185 0.151922733 0.153608138 0.154308909 0.160830976 0.161493600 0.168468685 0.171415167 0.175901176 0.178905686 0.181511928 0.184309226 0.188959962 0.189813926 0.191823468 0.201229054 0.202178819 0.206276507 0.206948050 0.207256237 0.212286118 0.212557485 0.214841221 0.216835704 0.220015933 0.220620705 0.221002861 0.224544657 0.225446577 0.231846074 0.234539096 0.235398326 0.238414885 0.246450173 0.249235096 0.251712754 0.256524819 0.257189655 0.258253021 0.262504909 0.271566603 0.282860016 0.291990756 0.299865542 0.300089102 0.300998140 0.307091927 0.307776593 0.309799728 0.319828604 0.321339711 0.326404584 0.330083326 0.336099509 0.347725597 0.352020180 0.355624724 0.360489063 0.361608973 0.364108665 0.384498440 0.406918042 0.414387706 0.430250531 0.432597763 0.435276596 0.450789691 0.464632796 0.475516529 0.478813437 0.480330384 0.486680141 0.498893918 0.503864898 0.514697825 0.517300376 0.543776541 0.566909802 0.567665687 0.586538787 0.592187003 0.605695486 0.644150756 0.645338733 0.667959095 0.675600294 0.687367236 0.703577189 0.704347830 0.705892694 0.709314569 0.717143235 0.733996418 0.737977013 0.739585791 0.747890769 0.750773955 0.771609223 0.775970568 0.808807165 0.821796132 0.823902896 0.828916836 0.834191522 0.847139313 0.849342331 0.851395977 0.854506439 0.863283072 0.867470565 0.875694852 0.887435468 0.891004478 0.892396963 0.893407570 0.901337949 0.910319851 0.918184436 0.924052041 0.924718911 0.931888297 0.935584193 0.956047414 0.963659204 0.965178619 0.970096134 0.978098951 0.982442898 0.998620372 1.012912342 1.015498160 1.021482296 1.040086705 1.055070822 1.070371044 1.072408728 1.079418844 1.087330262 1.106548301 1.110362773 1.113043095 1.118778360 1.122539288 1.123588957 1.141855150 1.148733726 1.161744054 1.170053237 1.176770072 1.187231626 1.200742837 1.221353864 1.232038363 1.258100340 1.296411637 1.298163462 1.314705211 1.326482248 1.327291481 1.330191093 1.331365536 1.334707895 1.342108294 1.348695817 1.365391011 1.379962419 1.381285357 1.381806201 1.428906565 1.516752260 1.557977985 1.684716691 1.923002513</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">218</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92168044" y3="-0.95465647" z3="-0.67820222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61219703" y3="-1.94996404" z3="-1.53106141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09439847" y3="-0.99538863" z3="-1.39605964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78297404" y3="1.47822947" z3="-1.05698773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28941047" y3="0.31083787" z3="-0.50003014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66433169" y3="2.73784149" z3="-1.16697203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01042288" y3="2.73593819" z3="-0.84638735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37805188" y3="4.99412892" z3="-0.39348474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81359574" y3="3.85189893" z3="-0.91061522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74966059" y3="5.86954523" z3="-0.20386748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10541702" y3="1.61179798" z3="-1.69815881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12264383" y3="0.35611475" z3="0.20713844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71655465" y3="0.3846123" z3="-0.66314641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60454419" y3="0.73690724" z3="0.25490358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67243851" y3="-0.85589544" z3="-1.52745933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09001237" y3="-2.46692223" z3="-1.33718216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9702602" y3="-5.49121068" z3="-6.29389177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71310336" y3="-5.05486633" z3="-5.3244617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03722436" y3="-3.9097355" z3="-2.86314109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67943173" y3="-3.67401851" z3="-5.18011839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43806982" y3="-5.87947467" z3="-4.23071523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11437608" y3="-5.30081613" z3="-3.0098506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35061933" y3="-3.06985663" z3="-3.95621153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90124742" y3="-3.00833628" z3="-6.01792749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48905768" y3="-6.96732458" z3="-4.32250554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93674391" y3="-5.93208673" z3="-2.13495666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64422837" y3="-3.35954268" z3="-1.61617692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35132906" y3="-3.84023584" z3="-0.86305836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69659607" y3="-4.84306148" z3="-1.12798275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37582589" y3="-3.53639144" z3="0.58547507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38853346" y3="-3.05759296" z3="3.34371014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67408513" y3="-4.57054068" z3="1.48119181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10389136" y3="-2.2578119" z3="1.08221678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10723486" y3="-2.02071865" z3="2.45244895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67175979" y3="-4.33340232" z3="2.85463386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86623458" y3="-5.57931913" z3="1.10418221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09703909" y3="-1.41778302" z3="0.41618164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12015047" y3="-1.01220796" z3="2.80827837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86994446" y3="-5.15750564" z3="3.54528995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38009183" y3="-2.87513109" z3="4.42226791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30116246" y3="-1.7339089" z3="-3.92808056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.44970417" y3="-1.32800907" z3="-3.02811592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34499702" y3="3.70777405" z3="-1.08086867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14178961" y3="-2.97425865" z3="-1.7023907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92147888" y3="-3.15753947" z3="-0.55633185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10840107" y3="-2.28764381" z3="0.38167291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83858842" y3="-0.72564752" z3="0.64989721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75009038" y3="-0.27609576" z3="-0.91422497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52734359" y3="0.46765751" z3="1.19469358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03343312" y3="-1.06965397" z3="2.04854832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40262383" y3="-4.37006725" z3="-0.32425749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11276666" y3="-4.61568776" z3="0.8798926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.07518066" y3="-0.01378935" z3="-1.74431693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38613213" y3="0.60779754" z3="-0.72564393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.40493896" y3="-1.10141455" z3="-1.24799301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65411789" y3="0.57276847" z3="0.52578648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13886195" y3="0.17623948" z3="2.18620759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0032044" y3="1.46081479" z3="1.29537196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49034217" y3="-0.12495312" z3="2.39435823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85164809" y3="-1.74471488" z3="1.7417777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.50966661" y3="-1.52550102" z3="2.90733097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04997644" y3="-4.03576627" z3="0.90378993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49762705" y3="-4.36385192" z3="1.75727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34146936" y3="-5.68949738" z3="0.87061896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27841752" y3="-2.19706719" z3="-0.17658731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13284329" y3="-3.29000686" z3="-1.04322096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48761274" y3="-4.45009393" z3="-0.63172169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99409065" y3="-4.51237619" z3="0.66601463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14405878" y3="-3.45786842" z3="1.56191551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77894753" y3="-2.29970048" z3="1.13136141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48902618" y3="-3.21386224" z3="-2.07382929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34402674" y3="-5.28746984" z3="-1.31548311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25902937" y3="-5.7037517" z3="1.09286653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73887774" y3="-3.54385618" z3="2.57122103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87400157" y3="-1.45479367" z3="1.8149997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49432324" y3="4.02097764" z3="-0.0022607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86350887" y3="3.8009012" z3="-0.07410522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39029639" y3="3.26302778" z3="-1.24306497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59012884" y3="2.97245891" z3="-2.34507597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22223323" y3="3.19456095" z3="-2.25641103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05816248" y3="4.39696636" z3="0.92593433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51907425" y3="4.01550879" z3="0.77089267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8229779" y3="2.96282892" z3="-1.30462517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04104181" y3="2.56376035" z3="-3.25020441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41920092" y3="2.94225993" z3="-3.1021487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16961153" y3="-5.92181641" z3="2.28011212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76298002" y3="-6.40199809" z3="0.22758693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29395401" y3="2.65255239" z3="-2.377761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4605485" y3="3.02421886" z3="-0.26996189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64208915" y3="0.16637106" z3="-1.99910491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96570275" y3="1.41346572" z3="-1.864027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.83085985" y3="0.09653013" z3="-2.77683965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31648976" y3="1.20562706" z3="-3.42387427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34644246" y3="-0.86508378" z3="-2.86053926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22858919" y3="1.13974712" z3="-4.02347399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47721522" y3="2.53585076" z3="-2.57405642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.62051267" y3="2.43474697" z3="-3.32983141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94589439" y3="3.48817336" z3="-2.52137368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.99229654" y3="3.31075411" z3="-3.8688468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57692409" y3="3.90648472" z3="-0.24198033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75547093" y3="5.05704938" z3="-0.05785584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92107077" y3="3.96055539" z3="0.2233835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43114189" y3="5.10588856" z3="0.78611163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.552079" y3="3.07417876" z3="0.13595194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46681807" y3="5.12141462" z3="1.13730543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31607821" y3="6.23224442" z3="0.51477883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62669101" y3="6.26262898" z3="0.9222291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67646672" y3="7.111882" z3="0.63680455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0463046" y3="7.17011566" z3="1.36530415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36547167" y3="-3.9166534" z3="-2.86843678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54090128" y3="-4.95479016" z3="-2.54712865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24423476" y3="-3.59304413" z3="-3.45817909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49571307" y3="-3.90389607" z3="-3.54418862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70831392" y3="-1.58416398" z3="-2.08209361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44813494" y3="-1.10903614" z3="-2.75166337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54198252" y3="-0.92485738" z3="-1.21612363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.76073841" y3="-1.62398402" z3="-2.64303297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9217,-.9547,-.6782;6.6122,-1.95,-1.5311;6.0944,-.9954,-1.3961;4.783,1.4782,-1.057;4.2894,.3108,-.5;2.6643,2.7378,-1.167;4.0104,2.7359,-.8464;2.3781,4.9941,-.3935;1.8136,3.8519,-.9106;1.7497,5.8695,-.2039;2.1054,1.6118,-1.6982;3.1226,.3561,.2071;1.7166,.3846,-.6631;.6045,.7369,.2549;1.6724,-.8559,-1.5275;1.09,-2.4669,-1.3372;1.9703,-5.4912,-6.2939;1.7131,-5.0549,-5.3245;1.0372,-3.9097,-2.8631;1.6794,-3.674,-5.1801;1.4381,-5.8795,-4.2307;1.1144,-5.3008,-3.0099;1.3506,-3.0699,-3.9562;1.9012,-3.0083,-6.0179;1.4891,-6.9673,-4.3225;.9367,-5.9321,-2.135;.6442,-3.3595,-1.6162;-.3513,-3.8402,-.8631;-.6966,-4.8431,-1.128;-.3758,-3.5364,.5855;-.3885,-3.0576,3.3437;-.6741,-4.5705,1.4812;-.1039,-2.2578,1.0822;-.1072,-2.0207,2.4524;-.6718,-4.3334,2.8546;-.8662,-5.5793,1.1042;.097,-1.4178,.4162;.1202,-1.0122,2.8083;-.8699,-5.1575,3.5453;-.3801,-2.8751,4.4223;1.3012,-1.7339,-3.9281;1.4497,-1.328,-3.0281;.345,3.7078,-1.0809;-2.1418,-2.9743,-1.7024;-2.9215,-3.1575,-.5563;-3.1084,-2.2876,.3817;-3.8386,-.7256,.6499;-4.7501,-.2761,-.9142;-2.5273,.4677,1.1947;-5.0334,-1.0697,2.0485;-3.4026,-4.3701,-.3243;-4.1128,-4.6157,.8799;-4.0752,-.0138,-1.7443;-5.3861,.6078,-.7256;-5.4049,-1.1014,-1.248;-1.6541,.5728,.5258;-2.1389,.1762,2.1862;-3.0032,1.4608,1.2954;-5.4903,-.125,2.3944;-5.8516,-1.7447,1.7418;-4.5097,-1.5255,2.9073;-5.05,-4.0358,.9038;-3.4976,-4.3639,1.7573;-4.3415,-5.6895,.8706;4.2784,-2.1971,-.1766;4.1328,-3.29,-1.0432;3.4876,-4.4501,-.6317;2.9941,-4.5124,.666;3.1441,-3.4579,1.5619;3.7789,-2.2997,1.1314;4.489,-3.2139,-2.0738;3.344,-5.2875,-1.3155;2.259,-5.7038,1.0929;2.7389,-3.5439,2.5712;3.874,-1.4548,1.815;-.4943,4.021,-.0023;-1.8635,3.8009,-.0741;-2.3903,3.263,-1.2431;-1.5901,2.9725,-2.3451;-.2222,3.1946,-2.2564;-.0582,4.397,.9259;-2.5191,4.0155,.7709;-3.823,2.9628,-1.3046;-2.041,2.5638,-3.2502;.4192,2.9423,-3.1021;2.1696,-5.9218,2.2801;1.763,-6.402,.2276;-4.294,2.6526,-2.3778;-4.4605,3.0242,-.27;6.6421,.1664,-1.9991;5.9657,1.4135,-1.864;7.8309,.0965,-2.7768;8.3165,1.2056,-3.4239;8.3464,-.8651,-2.8605;9.2286,1.1397,-4.0235;6.4772,2.5359,-2.5741;7.6205,2.4347,-3.3298;5.9459,3.4882,-2.5214;7.9923,3.3108,-3.8688;4.5769,3.9065,-.242;3.7555,5.057,-.0579;5.9211,3.9606,.2234;6.4311,5.1059,.7861;6.5521,3.0742,.136;7.4668,5.1214,1.1373;4.3161,6.2322,.5148;5.6267,6.2626,.9222;3.6765,7.1119,.6368;6.0463,7.1701,1.3653;-2.3655,-3.9167,-2.8684;-2.5409,-4.9548,-2.5471;-3.2442,-3.593,-3.4582;-1.4957,-3.9039,-3.5442;-1.7083,-1.5842,-2.0821;-2.4481,-1.109,-2.7517;-1.542,-.9249,-1.2161;-.7607,-1.624,-2.643;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662919601426</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001067737993 0.000180562054 0.020167155138 0.005240709307</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057078418 -0.000136153 0.000074829 0.000338738 0.000384724 0.000416797 0.000470846 0.000524719 0.000643686 0.000726628 0.000895528 0.000990491 0.001148490 0.001201100 0.001347456 0.001406672 0.001512779 0.001806261 0.002244939 0.002392725 0.002489579 0.002620882 0.002852044 0.003506328 0.003613292 0.003900878 0.004358788 0.004686323 0.004804212 0.005042482 0.005220786 0.005347434 0.006276380 0.006356082 0.006821284 0.006972549 0.007217494 0.007482317 0.008179933 0.008686879 0.008909027 0.009418789 0.009783114 0.010400710 0.011150901 0.011341883 0.011768600 0.012526820 0.013320498 0.013676485 0.013980240 0.014608403 0.014935200 0.015493323 0.015828886 0.016596857 0.017144685 0.018561501 0.018872616 0.019436422 0.020353434 0.020629250 0.021464921 0.021872332 0.022384568 0.022779040 0.023438430 0.023869978 0.024517288 0.025871283 0.026578105 0.026921098 0.027253748 0.027604237 0.028198040 0.029095942 0.030863813 0.031509818 0.032989402 0.034066365 0.034636903 0.035933319 0.039020106 0.039493332 0.041961652 0.045398849 0.046108892 0.046997405 0.048742832 0.049681850 0.049860234 0.050774278 0.051534431 0.052171780 0.052287050 0.052404315 0.052743041 0.053492250 0.054922600 0.056027284 0.056398638 0.056706852 0.057007047 0.057302681 0.057762305 0.058581141 0.059225138 0.059701294 0.061255469 0.062027587 0.062796909 0.064222496 0.064531874 0.064998156 0.065994257 0.067447925 0.067937676 0.068934154 0.070519739 0.072097828 0.072606381 0.072899204 0.073399009 0.075659529 0.078560714 0.080821698 0.081591747 0.083335586 0.084671064 0.088492587 0.089008804 0.089368672 0.089849961 0.091305580 0.093311828 0.094576080 0.095479181 0.096184811 0.096841915 0.098407330 0.100136452 0.100623761 0.102620452 0.103727340 0.104166436 0.106373695 0.108771035 0.110806592 0.112207256 0.112808674 0.113722864 0.114711677 0.116924573 0.117154057 0.118599752 0.119249284 0.120569862 0.122091235 0.125190981 0.125646225 0.128484451 0.128951914 0.130897612 0.133540339 0.136333977 0.137707768 0.138646647 0.139621655 0.140442376 0.143472125 0.144624666 0.145894590 0.146762293 0.151929326 0.153610459 0.154309689 0.160835839 0.161494060 0.168470789 0.171416447 0.175903553 0.178915340 0.181515017 0.184309624 0.188963688 0.189814793 0.191827038 0.201231975 0.202180932 0.206277227 0.206948055 0.207256291 0.212286276 0.212558066 0.214888998 0.216851573 0.220089627 0.220672438 0.221004107 0.224545852 0.225450679 0.231846153 0.234539111 0.235400203 0.238417521 0.246450413 0.249238321 0.251723037 0.256525159 0.257190341 0.258253263 0.262505679 0.271566676 0.282860673 0.291992169 0.299871792 0.300089359 0.300998233 0.307092090 0.307776978 0.309802091 0.319829796 0.321339865 0.326404624 0.330083394 0.336117335 0.347726288 0.352020224 0.355625160 0.360495755 0.361609308 0.364108722 0.384498665 0.406918537 0.414389293 0.430250870 0.432598785 0.435278939 0.450790335 0.464632922 0.475534137 0.478813590 0.480330856 0.486683452 0.498894017 0.503865029 0.514712226 0.517313962 0.543776717 0.566909939 0.567666968 0.586538829 0.592187461 0.605696630 0.644151519 0.645340916 0.667959407 0.675605011 0.687367264 0.703577723 0.704347832 0.705893614 0.709317110 0.717145593 0.733996468 0.737978084 0.739594565 0.747895450 0.750774225 0.771609271 0.775971408 0.808811369 0.821796138 0.823908384 0.828918716 0.834191723 0.847139301 0.849350866 0.851397173 0.854506781 0.863283083 0.867470567 0.875700072 0.887436335 0.891009137 0.892398450 0.893410256 0.901378030 0.910321287 0.918185370 0.924064291 0.924719978 0.931891318 0.935584225 0.956047502 0.963661627 0.965179862 0.970097391 0.978099975 0.982446010 0.998621088 1.012918459 1.015517112 1.021491872 1.040089074 1.055070846 1.070382172 1.072411432 1.079420393 1.087331612 1.106628847 1.110363254 1.113125862 1.118778614 1.122541332 1.123597982 1.141855401 1.148741514 1.161744390 1.170059837 1.176791101 1.187232292 1.200743003 1.221382122 1.232120145 1.258100782 1.296415209 1.298167112 1.314706951 1.326482341 1.327314487 1.330191502 1.331366376 1.334707986 1.342108336 1.348702028 1.365391680 1.379964511 1.381285514 1.381806359 1.428931962 1.516785314 1.557978002 1.684716706 1.923016962</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">219</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92055732" y3="-0.95475983" z3="-0.67918106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60926737" y3="-1.95056789" z3="-1.53510209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09168541" y3="-0.99594012" z3="-1.39965095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78118497" y3="1.47790531" z3="-1.05925322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28875447" y3="0.3109232" z3="-0.500468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66261957" y3="2.73809626" z3="-1.16429564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00953449" y3="2.73587486" z3="-0.84728441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37890203" y3="4.99466085" z3="-0.3901887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8128635" y3="3.85250503" z3="-0.90566342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75111351" y3="5.87031357" z3="-0.19848677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10186515" y3="1.6121917" z3="-1.69379001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12361174" y3="0.35690658" z3="0.20928383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71557805" y3="0.3850304" z3="-0.65778877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60554236" y3="0.73689149" z3="0.26278158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66971542" y3="-0.85551171" z3="-1.5219196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09066488" y3="-2.4677658" z3="-1.33378854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98389495" y3="-5.49095035" z3="-6.28866091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72410837" y3="-5.05486692" z3="-5.31982591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04162379" y3="-3.91036464" z3="-2.86003951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69014937" y3="-3.67408479" z3="-5.17513854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44596555" y3="-5.87976447" z3="-4.22712196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11900497" y3="-5.30141624" z3="-3.00700426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35802668" y3="-3.07020887" z3="-3.95198453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91432005" y3="-3.00817071" z3="-6.01209492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49711608" y3="-6.96758441" z3="-4.31909872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93908255" y3="-5.93297525" z3="-2.1328392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64588862" y3="-3.36030625" z3="-1.61393517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35035547" y3="-3.84183485" z3="-0.86215626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6946635" y3="-4.84489405" z3="-1.12751824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37716333" y3="-3.53796693" z3="0.58630817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39402629" y3="-3.05907182" z3="3.34451547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67705808" y3="-4.57203121" z3="1.48160502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10546237" y3="-2.25964494" z3="1.083509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11077775" y3="-2.02250853" z3="2.45374206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67687242" y3="-4.33478609" z3="2.85502043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86879418" y3="-5.58084441" z3="1.10438404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09689787" y3="-1.41978404" z3="0.4177401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11623569" y3="-1.01394105" z3="2.8097714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87658041" y3="-5.15868071" z3="3.54532814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38724518" y3="-2.87654969" z3="4.4230813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30877268" y3="-1.73431363" z3="-3.92367353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45358883" y3="-1.32840215" z3="-3.02316855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34385939" y3="3.70909307" z3="-1.07271064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14005907" y3="-2.97689072" z3="-1.7044631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92128388" y3="-3.15905432" z3="-0.55918246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10941693" y3="-2.28823397" z3="0.37763581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83920021" y3="-0.72566625" z3="0.64377092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74141179" y3="-0.27163567" z3="-0.92444863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52846156" y3="0.46388918" z3="1.19765476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04302312" y3="-1.06953422" z3="2.03455325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40266536" y3="-4.37146722" z3="-0.32629827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11404432" y3="-4.61595364" z3="0.87753214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06189809" y3="-0.00079894" z3="-1.74777316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38358996" y3="0.60764943" z3="-0.73506926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38938897" y3="-1.09811413" z3="-1.26814478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65254032" y3="0.56947235" z3="0.53207612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14417556" y3="0.16858765" z3="2.18954599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00290784" y3="1.4575407" z3="1.29972389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50123355" y3="-0.12457689" z3="2.37835066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8599774" y3="-1.74323787" z3="1.72161054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5255547" y3="-1.52673024" z3="2.89655074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05130837" y3="-4.03605978" z3="0.89977674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49967066" y3="-4.36292569" z3="1.75535095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34264931" y3="-5.68995767" z3="0.8693389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27828391" y3="-2.19693309" z3="-0.17569105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13326789" y3="-3.29105058" z3="-1.04086854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48836998" y3="-4.45078419" z3="-0.62797598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99436704" y3="-4.51153077" z3="0.66962927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14405161" y3="-3.45596329" z3="1.56425277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77883783" y3="-2.29823653" z3="1.13240683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48937436" y3="-3.21611617" z3="-2.07158529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34510552" y3="-5.28887925" z3="-1.31074439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25876657" y3="-5.70213125" z3="1.09752598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73862058" y3="-3.54069659" z3="2.57356297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.873506" y3="-1.45250018" z3="1.81505375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49291429" y3="4.02068187" z3="0.00765674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86239804" y3="3.80186117" z3="-0.06127908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39244857" y3="3.26847946" z3="-1.23096134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59503282" y3="2.9804475" z3="-2.33574018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2263845" y3="3.19978146" z3="-2.24846243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05401628" y3="4.39331204" z3="0.93623652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51608495" y3="4.01518606" z3="0.78512531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82581826" y3="2.97105004" z3="-1.29098855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04829752" y3="2.57534054" z3="-3.24121448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41266779" y3="2.94984581" z3="-3.09685183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16840163" y3="-5.91853501" z3="2.28499537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76319631" y3="-6.40138731" z3="0.23276774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29966736" y3="2.66727387" z3="-2.36456734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46091373" y3="3.02780832" z3="-0.25458883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63792119" y3="0.16531982" z3="-2.00491688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96192333" y3="1.41254007" z3="-1.86908057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82469244" y3="0.09483166" z3="-2.78564846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30864385" y3="1.20341477" z3="-3.43478887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34001516" y3="-0.86688946" z3="-2.86999508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21914645" y3="1.13700797" z3="-4.03676113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47169178" y3="2.53444068" z3="-2.58109658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61300309" y3="2.43270148" z3="-3.33977422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94058907" y3="3.4868892" z3="-2.5275193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98343257" y3="3.30831057" z3="-3.88035445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57798472" y3="3.90642006" z3="-0.24475173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75732138" y3="5.05727188" z3="-0.05854267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92339932" y3="3.96024669" z3="0.2169161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43526492" y3="5.10559525" z3="0.77791728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55402438" y3="3.07365521" z3="0.1279124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47189608" y3="5.12089848" z3="1.12623824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31978444" y3="6.23248874" z3="0.5121421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63149329" y3="6.26264233" z3="0.91593508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68077219" y3="7.11233649" z3="0.63549497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05255551" y3="7.17016055" z3="1.35750495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36211097" y3="-3.92034877" z3="-2.86999074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53857015" y3="-4.95802807" z3="-2.54793554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23953403" y3="-3.59689201" z3="-3.46148977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49123733" y3="-3.90863217" z3="-3.54437039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7058596" y3="-1.58712186" z3="-2.0848559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44501347" y3="-1.11197475" z3="-2.75518957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54001955" y3="-0.92749423" z3="-1.21889008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75792325" y3="-1.62765005" z3="-2.64517269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9206,-.9548,-.6792;6.6093,-1.9506,-1.5351;6.0917,-.9959,-1.3997;4.7812,1.4779,-1.0593;4.2888,.3109,-.5005;2.6626,2.7381,-1.1643;4.0095,2.7359,-.8473;2.3789,4.9947,-.3902;1.8129,3.8525,-.9057;1.7511,5.8703,-.1985;2.1019,1.6122,-1.6938;3.1236,.3569,.2093;1.7156,.385,-.6578;.6055,.7369,.2628;1.6697,-.8555,-1.5219;1.0907,-2.4678,-1.3338;1.9839,-5.491,-6.2887;1.7241,-5.0549,-5.3198;1.0416,-3.9104,-2.86;1.6901,-3.6741,-5.1751;1.446,-5.8798,-4.2271;1.119,-5.3014,-3.007;1.358,-3.0702,-3.952;1.9143,-3.0082,-6.0121;1.4971,-6.9676,-4.3191;.9391,-5.933,-2.1328;.6459,-3.3603,-1.6139;-.3504,-3.8418,-.8622;-.6947,-4.8449,-1.1275;-.3772,-3.538,.5863;-.394,-3.0591,3.3445;-.6771,-4.572,1.4816;-.1055,-2.2596,1.0835;-.1108,-2.0225,2.4537;-.6769,-4.3348,2.855;-.8688,-5.5808,1.1044;.0969,-1.4198,.4177;.1162,-1.0139,2.8098;-.8766,-5.1587,3.5453;-.3872,-2.8765,4.4231;1.3088,-1.7343,-3.9237;1.4536,-1.3284,-3.0232;.3439,3.7091,-1.0727;-2.1401,-2.9769,-1.7045;-2.9213,-3.1591,-.5592;-3.1094,-2.2882,.3776;-3.8392,-.7257,.6438;-4.7414,-.2716,-.9244;-2.5285,.4639,1.1977;-5.043,-1.0695,2.0346;-3.4027,-4.3715,-.3263;-4.114,-4.616,.8775;-4.0619,-.0008,-1.7478;-5.3836,.6076,-.7351;-5.3894,-1.0981,-1.2681;-1.6525,.5695,.5321;-2.1442,.1686,2.1895;-3.0029,1.4575,1.2997;-5.5012,-.1246,2.3784;-5.86,-1.7432,1.7216;-4.5256,-1.5267,2.8966;-5.0513,-4.0361,.8998;-3.4997,-4.3629,1.7554;-4.3426,-5.69,.8693;4.2783,-2.1969,-.1757;4.1333,-3.2911,-1.0409;3.4884,-4.4508,-.628;2.9944,-4.5115,.6696;3.1441,-3.456,1.5643;3.7788,-2.2982,1.1324;4.4894,-3.2161,-2.0716;3.3451,-5.2889,-1.3107;2.2588,-5.7021,1.0975;2.7386,-3.5407,2.5736;3.8735,-1.4525,1.8151;-.4929,4.0207,.0077;-1.8624,3.8019,-.0613;-2.3924,3.2685,-1.231;-1.595,2.9804,-2.3357;-.2264,3.1998,-2.2485;-.054,4.3933,.9362;-2.5161,4.0152,.7851;-3.8258,2.9711,-1.291;-2.0483,2.5753,-3.2412;.4127,2.9498,-3.0969;2.1684,-5.9185,2.285;1.7632,-6.4014,.2328;-4.2997,2.6673,-2.3646;-4.4609,3.0278,-.2546;6.6379,.1653,-2.0049;5.9619,1.4125,-1.8691;7.8247,.0948,-2.7856;8.3086,1.2034,-3.4348;8.34,-.8669,-2.87;9.2191,1.137,-4.0368;6.4717,2.5344,-2.5811;7.613,2.4327,-3.3398;5.9406,3.4869,-2.5275;7.9834,3.3083,-3.8804;4.578,3.9064,-.2448;3.7573,5.0573,-.0585;5.9234,3.9602,.2169;6.4353,5.1056,.7779;6.554,3.0737,.1279;7.4719,5.1209,1.1262;4.3198,6.2325,.5121;5.6315,6.2626,.9159;3.6808,7.1123,.6355;6.0526,7.1702,1.3575;-2.3621,-3.9203,-2.87;-2.5386,-4.958,-2.5479;-3.2395,-3.5969,-3.4615;-1.4912,-3.9086,-3.5444;-1.7059,-1.5871,-2.0849;-2.445,-1.112,-2.7552;-1.54,-.9275,-1.2189;-.7579,-1.6277,-2.6452;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925626888</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000323800063 0.000053978270 0.020047674509 0.005327899104</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057079254 -0.002389314 0.000034650 0.000316191 0.000380019 0.000411549 0.000460864 0.000519600 0.000635197 0.000685555 0.000849810 0.000988560 0.001149115 0.001196592 0.001350205 0.001391379 0.001496409 0.001804609 0.002228835 0.002341008 0.002485302 0.002626383 0.002852655 0.003514772 0.003633373 0.003846510 0.004359712 0.004708152 0.004813311 0.005047532 0.005218560 0.005356058 0.006272600 0.006347294 0.006732078 0.006959497 0.007214709 0.007556415 0.008176279 0.008679046 0.008898087 0.009421994 0.009788171 0.010406693 0.011160621 0.011327175 0.011808148 0.012528982 0.013340575 0.013677074 0.013997522 0.014630807 0.014976341 0.015471513 0.015829480 0.016603897 0.017114360 0.018568990 0.018888936 0.019436970 0.020355030 0.020641510 0.021487371 0.021880025 0.022422897 0.022773800 0.023442037 0.023868653 0.024514998 0.025870892 0.026579349 0.026920778 0.027268979 0.027599999 0.028197756 0.029097269 0.030873703 0.031511348 0.032979727 0.034073399 0.034650907 0.035955067 0.039020931 0.039496304 0.041961840 0.045398503 0.046156924 0.046978085 0.048769890 0.049688100 0.049864876 0.050796462 0.051535991 0.052172645 0.052287055 0.052406502 0.052746222 0.053526083 0.054920345 0.056045191 0.056403964 0.056706355 0.057004588 0.057301669 0.057767193 0.058584527 0.059226521 0.059701188 0.061260145 0.062033397 0.062797371 0.064222792 0.064531658 0.065000637 0.066002489 0.067457137 0.067937515 0.068934243 0.070520738 0.072123864 0.072623144 0.072899255 0.073438946 0.075688327 0.078562958 0.080819667 0.081614198 0.083346754 0.084663376 0.088489244 0.089004139 0.089373321 0.089851884 0.091305608 0.093311001 0.094576227 0.095479824 0.096187675 0.096850129 0.098412747 0.100150614 0.100688263 0.102624795 0.103727357 0.104175763 0.106378549 0.108771742 0.110853410 0.112205570 0.112817425 0.113776287 0.114718989 0.116924551 0.117162131 0.118600523 0.119269962 0.120577665 0.122089788 0.125190157 0.125691698 0.128494065 0.128967675 0.130943961 0.133540007 0.136333844 0.137725186 0.138645613 0.139620559 0.140507266 0.143474059 0.144635731 0.145897499 0.146764591 0.151972607 0.153633883 0.154322980 0.160869739 0.161492829 0.168496436 0.171431370 0.175930417 0.179019804 0.181554125 0.184312212 0.189006743 0.189822736 0.191859265 0.201253047 0.202198613 0.206283627 0.206948111 0.207256820 0.212287483 0.212561290 0.215217467 0.217023171 0.220319902 0.220998874 0.221745752 0.224565357 0.225517444 0.231847040 0.234539125 0.235421389 0.238454029 0.246448926 0.249233301 0.251812226 0.256527134 0.257198519 0.258254697 0.262511447 0.271567408 0.282866193 0.292006513 0.299932365 0.300093705 0.300999269 0.307094668 0.307780424 0.309822287 0.319840660 0.321341350 0.326404560 0.330082188 0.336275559 0.347729510 0.352020255 0.355628324 0.360556462 0.361612055 0.364108869 0.384497782 0.406922941 0.414404251 0.430254107 0.432598862 0.435284199 0.450797834 0.464633643 0.475653217 0.478815573 0.480335291 0.486692381 0.498894944 0.503865965 0.514824328 0.517461955 0.543779636 0.566911750 0.567679899 0.586539363 0.592186387 0.605702977 0.644156340 0.645361688 0.667961404 0.675648310 0.687367025 0.703581855 0.704347491 0.705866478 0.709341328 0.717162258 0.733994370 0.737985430 0.739649764 0.747955995 0.750776785 0.771609595 0.775978033 0.808833151 0.821796036 0.823950236 0.828929176 0.834192860 0.847138798 0.849401629 0.851409566 0.854508897 0.863283313 0.867470580 0.875736493 0.887448007 0.891039934 0.892398764 0.893429705 0.901676575 0.910326607 0.918185559 0.924138513 0.924721970 0.931915458 0.935584264 0.956047206 0.963672360 0.965188848 0.970110359 0.978103007 0.982463437 0.998627646 1.012942647 1.015658180 1.021559034 1.040107628 1.055071238 1.070449675 1.072427172 1.079433058 1.087340323 1.107131740 1.110365876 1.113746394 1.118782556 1.122555359 1.123677591 1.141856627 1.148798419 1.161747095 1.170107352 1.176928796 1.187235023 1.200744243 1.221562586 1.232715804 1.258108913 1.296450052 1.298188482 1.314717690 1.326482368 1.327451061 1.330198078 1.331376272 1.334708622 1.342108028 1.348739956 1.365401688 1.379986607 1.381285747 1.381805625 1.429127042 1.517119704 1.557978012 1.684716993 1.923089904</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">220</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91626625" y3="-0.95489413" z3="-0.68464869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60493688" y3="-1.94877048" z3="-1.54275773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0872212" y3="-0.99450048" z3="-1.40553515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77744007" y3="1.47851235" z3="-1.059568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28456701" y3="0.31049279" z3="-0.50339845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66013425" y3="2.7398741" z3="-1.1634473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00661621" y3="2.73622942" z3="-0.8451263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37735869" y3="4.99543158" z3="-0.38534504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81090698" y3="3.85458819" z3="-0.90312141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74997866" y3="5.87175786" z3="-0.19173312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09901593" y3="1.61524361" z3="-1.6954652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11906182" y3="0.35552776" z3="0.20589119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71187021" y3="0.38564019" z3="-0.66247269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60111784" y3="0.73579864" z3="0.25796905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66676054" y3="-0.85344035" z3="-1.52858584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0923537" y3="-2.46823857" z3="-1.33383405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97523808" y3="-5.50178221" z3="-6.28567482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71838878" y3="-5.06355778" z3="-5.31696159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04202012" y3="-3.91348935" z3="-2.8580578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68402324" y3="-3.68240976" z3="-5.17548765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44430145" y3="-5.88612267" z3="-4.22133716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12034834" y3="-5.30498385" z3="-3.00168253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35516521" y3="-3.07572524" z3="-3.95276985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9050239" y3="-3.01827715" z3="-6.01477322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49604331" y3="-6.97418928" z3="-4.31079167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94360204" y3="-5.93467427" z3="-2.12547266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64734893" y3="-3.3603531" z3="-1.61284354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34743793" y3="-3.84222781" z3="-0.85904729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69158171" y3="-4.84568855" z3="-1.12359847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37364759" y3="-3.53828337" z3="0.58929048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38706979" y3="-3.06209024" z3="3.34785002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66949535" y3="-4.57403123" z3="1.48431297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10406809" y3="-2.26015409" z3="1.08709431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10761248" y3="-2.02448621" z3="2.45761158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66744065" y3="-4.33805338" z3="2.8578922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85918023" y3="-5.58337727" z3="1.10688194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0949209" y3="-1.41900964" z3="0.42177023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11670245" y3="-1.01523044" z3="2.81409504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86431853" y3="-5.16284408" z3="3.54750998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37872541" y3="-2.88048048" z3="4.42655913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30551181" y3="-1.73985995" z3="-3.92746566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4500422" y3="-1.33160567" z3="-3.02810785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34243816" y3="3.71129684" z3="-1.0721306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13914461" y3="-2.97837567" z3="-1.70176895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91955558" y3="-3.15695435" z3="-0.55556352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10672717" y3="-2.28375931" z3="0.37904521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83471365" y3="-0.719135" z3="0.63980813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73089084" y3="-0.2652093" z3="-0.93189941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52454609" y3="0.47000181" z3="1.19603696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04283841" y3="-1.05771731" z3="2.02761993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40091213" y3="-4.36894056" z3="-0.31886349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11245009" y3="-4.60968485" z3="0.88557915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04770892" y3="0.00581973" z3="-1.75180396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37426748" y3="0.61374341" z3="-0.74629613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37653491" y3="-1.091891" z3="-1.27845655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64692142" y3="0.57539117" z3="0.53169844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14157525" y3="0.17510276" z3="2.18852092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99940921" y3="1.46348138" z3="1.29708203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50047037" y3="-0.11080165" z3="2.36735924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85999874" y3="-1.73080736" z3="1.71373776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52910334" y3="-1.51346293" z3="2.89308229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04898548" y3="-4.0286314" z3="0.90614313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49742976" y3="-4.35422583" z3="1.76271604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34195711" y3="-5.68382678" z3="0.88067978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27560136" y3="-2.19824266" z3="-0.18196664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.133844" y3="-3.29320302" z3="-1.04665458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49211743" y3="-4.45454907" z3="-0.6333483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99788369" y3="-4.51610832" z3="0.66413699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14401077" y3="-3.45952598" z3="1.55812774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77555627" y3="-2.30018613" z3="1.1258812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4900872" y3="-3.21786957" z3="-2.07727049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35101647" y3="-5.29288216" z3="-1.31587855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26577994" y3="-5.70845048" z3="1.09278715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.738103" y3="-3.54453245" z3="2.56723625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86717165" y3="-1.45352946" z3="1.80806431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49675277" y3="4.02559229" z3="0.00337004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86544604" y3="3.80390307" z3="-0.06513533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3934229" y3="3.27037433" z3="-1.2362731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59436678" y3="2.98319169" z3="-2.34090192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22522068" y3="3.20107184" z3="-2.24885164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05872125" y3="4.39727823" z3="0.9340856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52133379" y3="4.01820878" z3="0.77818658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82659343" y3="2.97285757" z3="-1.29942335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04538386" y3="2.57697305" z3="-3.24660431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41569277" y3="2.95086511" z3="-3.09673667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17757418" y3="-5.92510835" z3="2.28030196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77095707" y3="-6.40900334" z3="0.22869621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29870954" y3="2.67143415" z3="-2.37414915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46309563" y3="3.02700671" z3="-0.26370043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63331354" y3="0.16789849" z3="-2.00878642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95760205" y3="1.4148627" z3="-1.87008473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81970687" y3="0.09910971" z3="-2.79017853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30296377" y3="1.20896176" z3="-3.43773347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33523474" y3="-0.86231461" z3="-2.87636147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21318159" y3="1.14383759" z3="-4.0402658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46655619" y3="2.53828418" z3="-2.58031617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6071355" y3="2.43798519" z3="-3.34028783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93517715" y3="3.49055842" z3="-2.52440008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97682262" y3="3.31445998" z3="-3.88002449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57531173" y3="3.90475913" z3="-0.23900922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75550576" y3="5.05589944" z3="-0.05112335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91983764" y3="3.95579932" z3="0.22561767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43163501" y3="5.09875182" z3="0.79168649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54964577" y3="3.06859557" z3="0.1346491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46745691" y3="5.11185125" z3="1.14262608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31804607" y3="6.22871815" z3="0.52459926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62876769" y3="6.25614735" z3="0.93187699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67990824" y3="7.10872148" z3="0.64919548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04982993" y3="7.1616984" z3="1.37755262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36135214" y3="-3.925478" z3="-2.86419139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53705952" y3="-4.96206008" z3="-2.53908743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23881609" y3="-3.60390463" z3="-3.45593217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49078349" y3="-3.91520608" z3="-3.53897693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70481672" y3="-1.58987656" z3="-2.08676622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44449871" y3="-1.11670785" z3="-2.75780085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53859587" y3="-0.92765133" z3="-1.22261579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75740891" y3="-1.63227934" z3="-2.64782396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9163,-.9549,-.6846;6.6049,-1.9488,-1.5428;6.0872,-.9945,-1.4055;4.7774,1.4785,-1.0596;4.2846,.3105,-.5034;2.6601,2.7399,-1.1634;4.0066,2.7362,-.8451;2.3774,4.9954,-.3853;1.8109,3.8546,-.9031;1.75,5.8718,-.1917;2.099,1.6152,-1.6955;3.1191,.3555,.2059;1.7119,.3856,-.6625;.6011,.7358,.258;1.6668,-.8534,-1.5286;1.0924,-2.4682,-1.3338;1.9752,-5.5018,-6.2857;1.7184,-5.0636,-5.317;1.042,-3.9135,-2.8581;1.684,-3.6824,-5.1755;1.4443,-5.8861,-4.2213;1.1203,-5.305,-3.0017;1.3552,-3.0757,-3.9528;1.905,-3.0183,-6.0148;1.496,-6.9742,-4.3108;.9436,-5.9347,-2.1255;.6473,-3.3604,-1.6128;-.3474,-3.8422,-.859;-.6916,-4.8457,-1.1236;-.3736,-3.5383,.5893;-.3871,-3.0621,3.3479;-.6695,-4.574,1.4843;-.1041,-2.2602,1.0871;-.1076,-2.0245,2.4576;-.6674,-4.3381,2.8579;-.8592,-5.5834,1.1069;.0949,-1.419,.4218;.1167,-1.0152,2.8141;-.8643,-5.1628,3.5475;-.3787,-2.8805,4.4266;1.3055,-1.7399,-3.9275;1.45,-1.3316,-3.0281;.3424,3.7113,-1.0721;-2.1391,-2.9784,-1.7018;-2.9196,-3.157,-.5556;-3.1067,-2.2838,.379;-3.8347,-.7191,.6398;-4.7309,-.2652,-.9319;-2.5245,.47,1.196;-5.0428,-1.0577,2.0276;-3.4009,-4.3689,-.3189;-4.1125,-4.6097,.8856;-4.0477,.0058,-1.7518;-5.3743,.6137,-.7463;-5.3765,-1.0919,-1.2785;-1.6469,.5754,.5317;-2.1416,.1751,2.1885;-2.9994,1.4635,1.2971;-5.5005,-.1108,2.3674;-5.86,-1.7308,1.7137;-4.5291,-1.5135,2.8931;-5.049,-4.0286,.9061;-3.4974,-4.3542,1.7627;-4.342,-5.6838,.8807;4.2756,-2.1982,-.182;4.1338,-3.2932,-1.0467;3.4921,-4.4545,-.6333;2.9979,-4.5161,.6641;3.144,-3.4595,1.5581;3.7756,-2.3002,1.1259;4.4901,-3.2179,-2.0773;3.351,-5.2929,-1.3159;2.2658,-5.7085,1.0928;2.7381,-3.5445,2.5672;3.8672,-1.4535,1.8081;-.4968,4.0256,.0034;-1.8654,3.8039,-.0651;-2.3934,3.2704,-1.2363;-1.5944,2.9832,-2.3409;-.2252,3.2011,-2.2489;-.0587,4.3973,.9341;-2.5213,4.0182,.7782;-3.8266,2.9729,-1.2994;-2.0454,2.577,-3.2466;.4157,2.9509,-3.0967;2.1776,-5.9251,2.2803;1.771,-6.409,.2287;-4.2987,2.6714,-2.3741;-4.4631,3.027,-.2637;6.6333,.1679,-2.0088;5.9576,1.4149,-1.8701;7.8197,.0991,-2.7902;8.303,1.209,-3.4377;8.3352,-.8623,-2.8764;9.2132,1.1438,-4.0403;6.4666,2.5383,-2.5803;7.6071,2.438,-3.3403;5.9352,3.4906,-2.5244;7.9768,3.3145,-3.88;4.5753,3.9048,-.239;3.7555,5.0559,-.0511;5.9198,3.9558,.2256;6.4316,5.0988,.7917;6.5496,3.0686,.1346;7.4675,5.1119,1.1426;4.318,6.2287,.5246;5.6288,6.2561,.9319;3.6799,7.1087,.6492;6.0498,7.1617,1.3776;-2.3614,-3.9255,-2.8642;-2.5371,-4.9621,-2.5391;-3.2388,-3.6039,-3.4559;-1.4908,-3.9152,-3.539;-1.7048,-1.5899,-2.0868;-2.4445,-1.1167,-2.7578;-1.5386,-.9277,-1.2226;-.7574,-1.6323,-2.6478;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662911453273</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.003098416769 0.000392709205 0.017713124370 0.005339257123</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057079454 -0.000148715 0.000033320 0.000316645 0.000381077 0.000411836 0.000463042 0.000519785 0.000656309 0.000745082 0.000862165 0.000993593 0.001153665 0.001197926 0.001357050 0.001405587 0.001520108 0.001805504 0.002230491 0.002366467 0.002497812 0.002626240 0.002853122 0.003515343 0.003638205 0.003857745 0.004359408 0.004709283 0.004814429 0.005049045 0.005219073 0.005356035 0.006290671 0.006348512 0.006733163 0.006966530 0.007215933 0.007559451 0.008176940 0.008679378 0.008898159 0.009424287 0.009788311 0.010407969 0.011160480 0.011328272 0.011809056 0.012529385 0.013340724 0.013677917 0.013997481 0.014630832 0.014976342 0.015471346 0.015830768 0.016604683 0.017115642 0.018569206 0.018889520 0.019438573 0.020355082 0.020641972 0.021489464 0.021880004 0.022426696 0.022774136 0.023442020 0.023868777 0.024515196 0.025870960 0.026580100 0.026920964 0.027271858 0.027601590 0.028199436 0.029100260 0.030875541 0.031513863 0.032979761 0.034073247 0.034651784 0.035954907 0.039023731 0.039496492 0.041961921 0.045398706 0.046156858 0.046978302 0.048777440 0.049688419 0.049865211 0.050797741 0.051536163 0.052172650 0.052287059 0.052406541 0.052746344 0.053532045 0.054920482 0.056049066 0.056407744 0.056706347 0.057005161 0.057301492 0.057767356 0.058585692 0.059226589 0.059701638 0.061260730 0.062034360 0.062798480 0.064224445 0.064533089 0.065000629 0.066005133 0.067457188 0.067938883 0.068934370 0.070520645 0.072134067 0.072623099 0.072899322 0.073443898 0.075689686 0.078563593 0.080823544 0.081620613 0.083346759 0.084666950 0.088488885 0.089004584 0.089374469 0.089853799 0.091305695 0.093311130 0.094576560 0.095479991 0.096189312 0.096850820 0.098413832 0.100152079 0.100688218 0.102626156 0.103727752 0.104175940 0.106382255 0.108776280 0.110853737 0.112205676 0.112818580 0.113785268 0.114721629 0.116924923 0.117165152 0.118601144 0.119271298 0.120579239 0.122107824 0.125190834 0.125698819 0.128493862 0.128975143 0.130945283 0.133543677 0.136333902 0.137725570 0.138645460 0.139620666 0.140516446 0.143474070 0.144636962 0.145898338 0.146765061 0.151976231 0.153633557 0.154323841 0.160871643 0.161494209 0.168501048 0.171433859 0.175932097 0.179047427 0.181565460 0.184312411 0.189026118 0.189822819 0.191870690 0.201258541 0.202198650 0.206284169 0.206948113 0.207257209 0.212287520 0.212563953 0.215281758 0.217047165 0.220331049 0.220998764 0.222289263 0.224565024 0.225558912 0.231847018 0.234539127 0.235429793 0.238473515 0.246448722 0.249241685 0.251825962 0.256528905 0.257201659 0.258255388 0.262512901 0.271568035 0.282868787 0.292009942 0.299954095 0.300093843 0.301000226 0.307094903 0.307781536 0.309827733 0.319841619 0.321341872 0.326404564 0.330082230 0.336362980 0.347733593 0.352021118 0.355630059 0.360558126 0.361612201 0.364109876 0.384498483 0.406929098 0.414405275 0.430254120 0.432615792 0.435304747 0.450800700 0.464634253 0.475679144 0.478817259 0.480335732 0.486704344 0.498895497 0.503867033 0.514901066 0.517513205 0.543779686 0.566915131 0.567682066 0.586539769 0.592186966 0.605712610 0.644156344 0.645370958 0.667964805 0.675658220 0.687367119 0.703584009 0.704347490 0.705881055 0.709360135 0.717170125 0.733994698 0.737989520 0.739679465 0.747957096 0.750778384 0.771610183 0.775980852 0.808840537 0.821796175 0.823986006 0.828934964 0.834199567 0.847138929 0.849415236 0.851414497 0.854508885 0.863284722 0.867470581 0.875771620 0.887454785 0.891059187 0.892398629 0.893429618 0.901849962 0.910328824 0.918185604 0.924155563 0.924722206 0.931925356 0.935585123 0.956049569 0.963679766 0.965193726 0.970110444 0.978128585 0.982491304 0.998628289 1.012954606 1.015728448 1.021597283 1.040119538 1.055071390 1.070501962 1.072440848 1.079438731 1.087348552 1.107514222 1.110371129 1.114398624 1.118789911 1.122569014 1.123718820 1.141861533 1.148836316 1.161749122 1.170142894 1.177071988 1.187238913 1.200748441 1.221699283 1.233169939 1.258110573 1.296451096 1.298195616 1.314717883 1.326482641 1.327464486 1.330198968 1.331376333 1.334708805 1.342111188 1.348755110 1.365412943 1.379986708 1.381286057 1.381807144 1.429211734 1.517130872 1.557979502 1.684717211 1.923121063</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">221</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91771671" y3="-0.9563368" z3="-0.6888764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60534526" y3="-1.94802066" z3="-1.55191018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08720524" y3="-0.994292" z3="-1.41233826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77627358" y3="1.47741506" z3="-1.06049392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28518373" y3="0.30831334" z3="-0.50538622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65724259" y3="2.73689277" z3="-1.16072824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00392847" y3="2.73388113" z3="-0.84295664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37271472" y3="4.98986208" z3="-0.37645596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80729366" y3="3.85025715" z3="-0.89857645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74481972" y3="5.86468023" z3="-0.18244559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09750923" y3="1.61241027" z3="-1.69450878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12029681" y3="0.35176391" z3="0.20502588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71241328" y3="0.38188488" z3="-0.66203493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60227525" y3="0.731466" z3="0.25938203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6671023" y3="-0.85697522" z3="-1.52832616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09307122" y3="-2.4714589" z3="-1.33550671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97950632" y3="-5.50812814" z3="-6.28396179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7209943" y3="-5.06935563" z3="-5.31603248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04212945" y3="-3.91800792" z3="-2.85831274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68996045" y3="-3.68849804" z3="-5.17400043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44146353" y3="-5.89100978" z3="-4.22169885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11637181" y3="-5.30928225" z3="-3.00281778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3596003" y3="-3.08110485" z3="-3.9520621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91523697" y3="-3.0250551" z3="-6.01223335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49022452" y3="-6.97894871" z3="-4.31137914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93587118" y3="-5.93859343" z3="-2.12757023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6488231" y3="-3.36535277" z3="-1.61249818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34623895" y3="-3.84513001" z3="-0.85859321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69215087" y3="-4.84764197" z3="-1.12318318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3714106" y3="-3.54101849" z3="0.58974091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38262537" y3="-3.06289551" z3="3.34807344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6662941" y3="-4.57603588" z3="1.4853871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10258732" y3="-2.26181155" z3="1.08645904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10539774" y3="-2.02500615" z3="2.45681411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6629856" y3="-4.33921819" z3="2.85895784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85664738" y3="-5.58498312" z3="1.10819656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0951999" y3="-1.42103483" z3="0.42033137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1193365" y3="-1.01610448" z3="2.81282585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85798705" y3="-5.1640054" z3="3.54982129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37353774" y3="-2.88066362" z3="4.42670179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31361041" y3="-1.74526005" z3="-3.92707345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45613354" y3="-1.3368651" z3="-3.02754009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33850298" y3="3.70992135" z3="-1.07019952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13774826" y3="-2.97959362" z3="-1.70098881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91636337" y3="-3.15259338" z3="-0.552306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10060149" y3="-2.27461247" z3="0.37876301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83285954" y3="-0.71148537" z3="0.63543998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72229165" y3="-0.25963463" z3="-0.941033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52213783" y3="0.47525164" z3="1.19539343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04926023" y3="-1.04713506" z3="2.01813081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40010406" y3="-4.36235799" z3="-0.30978238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10807683" y3="-4.59744133" z3="0.89852259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03515016" y3="0.01512878" z3="-1.7568829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36995859" y3="0.61665108" z3="-0.75680311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36309801" y3="-1.08840225" z3="-1.29323579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64450991" y3="0.57977474" z3="0.53174509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14082485" y3="0.17799318" z3="2.18791132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99521038" y3="1.46960507" z3="1.29667023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50766407" y3="-0.09904043" z3="2.35341087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86602221" y3="-1.71978028" z3="1.70130079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54011488" y3="-1.50132762" z3="2.88677313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0439461" y3="-4.01545768" z3="0.92015114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48999462" y3="-4.34025204" z3="1.77271621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33965333" y3="-5.67092246" z3="0.8983929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27853172" y3="-2.20016758" z3="-0.1855195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13664597" y3="-3.2954077" z3="-1.0496427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49535052" y3="-4.45664883" z3="-0.63552609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00148841" y3="-4.51758015" z3="0.66215742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14793046" y3="-3.46083691" z3="1.55565608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77936942" y3="-2.30191185" z3="1.12271877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49245757" y3="-3.22046968" z3="-2.08048214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35492858" y3="-5.29602382" z3="-1.31735689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26974008" y3="-5.70977526" z3="1.09182453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74269831" y3="-3.54574638" z3="2.56504715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87164668" y3="-1.45561859" z3="1.80470326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50110337" y3="4.02384838" z3="0.00797071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87136624" y3="3.80978312" z3="-0.06757471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39877945" y3="3.2765317" z3="-1.23834837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59798307" y3="2.98452584" z3="-2.33897764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22914728" y3="3.2008162" z3="-2.24748437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06504234" y3="4.39684767" z3="0.93718207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52719902" y3="4.02497992" z3="0.77711778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83282571" y3="2.98222708" z3="-1.30251786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04912393" y3="2.5793825" z3="-3.24576131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41299335" y3="2.94652456" z3="-3.09149071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18182232" y3="-5.92548488" z3="2.27967609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77487861" y3="-6.41101761" z3="0.22823794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30574641" y3="2.68486342" z3="-2.37844368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46906678" y3="3.03420249" z3="-0.26641808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63145746" y3="0.16933757" z3="-2.01492814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95576402" y3="1.41597445" z3="-1.87220767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81606728" y3="0.10227308" z3="-2.79928813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29829634" y3="1.21382207" z3="-3.44471243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3310959" y3="-0.85914119" z3="-2.88960658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20696326" y3="1.14995504" z3="-4.04976083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46412268" y3="2.54139653" z3="-2.57964027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60342537" y3="2.44303098" z3="-3.34173385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93339736" y3="3.49377612" z3="-2.51978767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97276159" y3="3.32125333" z3="-3.87888454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57166406" y3="3.90128189" z3="-0.23406035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75043541" y3="5.05082612" z3="-0.04223096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91671206" y3="3.95273829" z3="0.22887322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42736756" y3="5.09469476" z3="0.79748707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54789584" y3="3.06706133" z3="0.13511215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46354058" y3="5.10816535" z3="1.14719238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31177346" y3="6.22268213" z3="0.53600551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62292326" y3="6.25053201" z3="0.94174334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67234318" y3="7.10158875" z3="0.66391173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04301195" y3="7.15527447" z3="1.38959603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36457599" y3="-3.93040304" z3="-2.85959098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54333452" y3="-4.96514354" z3="-2.52918202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24225823" y3="-3.60930175" z3="-3.4516725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49516501" y3="-3.92589417" z3="-3.53620109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6997883" y3="-1.59375614" z3="-2.09106927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43786799" y3="-1.12077172" z3="-2.76429182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53147708" y3="-0.92903932" z3="-1.22959961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75289056" y3="-1.64041204" z3="-2.65256555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9177,-.9563,-.6889;6.6053,-1.948,-1.5519;6.0872,-.9943,-1.4123;4.7763,1.4774,-1.0605;4.2852,.3083,-.5054;2.6572,2.7369,-1.1607;4.0039,2.7339,-.843;2.3727,4.9899,-.3765;1.8073,3.8503,-.8986;1.7448,5.8647,-.1824;2.0975,1.6124,-1.6945;3.1203,.3518,.205;1.7124,.3819,-.662;.6023,.7315,.2594;1.6671,-.857,-1.5283;1.0931,-2.4715,-1.3355;1.9795,-5.5081,-6.284;1.721,-5.0694,-5.316;1.0421,-3.918,-2.8583;1.69,-3.6885,-5.174;1.4415,-5.891,-4.2217;1.1164,-5.3093,-3.0028;1.3596,-3.0811,-3.9521;1.9152,-3.0251,-6.0122;1.4902,-6.9789,-4.3114;.9359,-5.9386,-2.1276;.6488,-3.3654,-1.6125;-.3462,-3.8451,-.8586;-.6922,-4.8476,-1.1232;-.3714,-3.541,.5897;-.3826,-3.0629,3.3481;-.6663,-4.576,1.4854;-.1026,-2.2618,1.0865;-.1054,-2.025,2.4568;-.663,-4.3392,2.859;-.8566,-5.585,1.1082;.0952,-1.421,.4203;.1193,-1.0161,2.8128;-.858,-5.164,3.5498;-.3735,-2.8807,4.4267;1.3136,-1.7453,-3.9271;1.4561,-1.3369,-3.0275;.3385,3.7099,-1.0702;-2.1377,-2.9796,-1.701;-2.9164,-3.1526,-.5523;-3.1006,-2.2746,.3788;-3.8329,-.7115,.6354;-4.7223,-.2596,-.941;-2.5221,.4753,1.1954;-5.0493,-1.0471,2.0181;-3.4001,-4.3624,-.3098;-4.1081,-4.5974,.8985;-4.0352,.0151,-1.7569;-5.37,.6167,-.7568;-5.3631,-1.0884,-1.2932;-1.6445,.5798,.5317;-2.1408,.178,2.1879;-2.9952,1.4696,1.2967;-5.5077,-.099,2.3534;-5.866,-1.7198,1.7013;-4.5401,-1.5013,2.8868;-5.0439,-4.0155,.9202;-3.49,-4.3403,1.7727;-4.3397,-5.6709,.8984;4.2785,-2.2002,-.1855;4.1366,-3.2954,-1.0496;3.4954,-4.4566,-.6355;3.0015,-4.5176,.6622;3.1479,-3.4608,1.5557;3.7794,-2.3019,1.1227;4.4925,-3.2205,-2.0805;3.3549,-5.296,-1.3174;2.2697,-5.7098,1.0918;2.7427,-3.5457,2.565;3.8716,-1.4556,1.8047;-.5011,4.0238,.008;-1.8714,3.8098,-.0676;-2.3988,3.2765,-1.2383;-1.598,2.9845,-2.339;-.2291,3.2008,-2.2475;-.065,4.3968,.9372;-2.5272,4.025,.7771;-3.8328,2.9822,-1.3025;-2.0491,2.5794,-3.2458;.413,2.9465,-3.0915;2.1818,-5.9255,2.2797;1.7749,-6.411,.2282;-4.3057,2.6849,-2.3784;-4.4691,3.0342,-.2664;6.6315,.1693,-2.0149;5.9558,1.416,-1.8722;7.8161,.1023,-2.7993;8.2983,1.2138,-3.4447;8.3311,-.8591,-2.8896;9.207,1.15,-4.0498;6.4641,2.5414,-2.5796;7.6034,2.443,-3.3417;5.9334,3.4938,-2.5198;7.9728,3.3213,-3.8789;4.5717,3.9013,-.2341;3.7504,5.0508,-.0422;5.9167,3.9527,.2289;6.4274,5.0947,.7975;6.5479,3.0671,.1351;7.4635,5.1082,1.1472;4.3118,6.2227,.536;5.6229,6.2505,.9417;3.6723,7.1016,.6639;6.043,7.1553,1.3896;-2.3646,-3.9304,-2.8596;-2.5433,-4.9651,-2.5292;-3.2423,-3.6093,-3.4517;-1.4952,-3.9259,-3.5362;-1.6998,-1.5938,-2.0911;-2.4379,-1.1208,-2.7643;-1.5315,-.929,-1.2296;-.7529,-1.6404,-2.6526;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662915554800</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002153506008 0.000262551195 0.023512018477 0.005326898288</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057080780 -0.000407322 0.000043378 0.000331422 0.000382448 0.000420912 0.000479355 0.000522251 0.000656231 0.000751996 0.000860083 0.000990415 0.001155316 0.001200143 0.001354077 0.001411476 0.001533325 0.001804655 0.002229686 0.002370909 0.002507369 0.002630017 0.002852854 0.003515199 0.003635506 0.003860842 0.004360961 0.004711429 0.004814254 0.005048650 0.005222887 0.005356166 0.006320474 0.006349686 0.006733140 0.006982395 0.007215652 0.007574106 0.008177473 0.008679339 0.008897933 0.009437181 0.009788717 0.010427069 0.011160787 0.011328229 0.011808741 0.012529831 0.013341466 0.013681065 0.013999310 0.014630731 0.014977703 0.015471263 0.015831988 0.016606957 0.017115188 0.018569130 0.018890218 0.019440174 0.020355495 0.020643934 0.021490273 0.021880035 0.022432041 0.022774279 0.023442245 0.023868788 0.024515221 0.025870852 0.026580316 0.026921270 0.027273352 0.027603122 0.028200246 0.029104480 0.030880412 0.031518109 0.032983085 0.034073252 0.034651596 0.035957932 0.039037339 0.039499794 0.041963153 0.045398464 0.046159783 0.046986708 0.048787973 0.049688868 0.049865467 0.050798531 0.051536102 0.052172760 0.052287121 0.052406513 0.052746809 0.053538135 0.054920727 0.056056363 0.056410165 0.056706817 0.057005059 0.057301065 0.057767362 0.058587021 0.059226584 0.059704930 0.061261634 0.062034067 0.062808100 0.064227037 0.064541221 0.065001382 0.066006712 0.067462588 0.067947955 0.068934806 0.070523766 0.072133266 0.072623452 0.072899260 0.073443104 0.075689145 0.078564544 0.080831469 0.081628647 0.083346972 0.084666372 0.088489197 0.089004825 0.089374639 0.089855371 0.091306031 0.093311131 0.094576678 0.095480768 0.096189683 0.096852846 0.098416105 0.100151604 0.100695864 0.102626022 0.103727869 0.104175913 0.106395544 0.108788537 0.110854303 0.112207723 0.112818551 0.113789957 0.114723275 0.116925731 0.117165118 0.118601163 0.119270997 0.120579014 0.122140899 0.125192755 0.125712781 0.128493699 0.128981880 0.130950596 0.133565011 0.136335591 0.137726817 0.138645339 0.139620683 0.140518314 0.143474262 0.144643647 0.145902213 0.146767414 0.151976202 0.153632509 0.154324206 0.160872598 0.161500564 0.168503992 0.171436905 0.175932554 0.179069113 0.181572839 0.184314209 0.189043073 0.189825968 0.191873131 0.201265358 0.202202553 0.206284399 0.206948212 0.207257461 0.212287802 0.212567370 0.215315402 0.217065320 0.220332038 0.221004426 0.222736823 0.224564593 0.225594185 0.231848041 0.234539129 0.235431759 0.238487100 0.246450423 0.249275780 0.251831589 0.256530151 0.257203504 0.258259388 0.262515398 0.271570085 0.282868567 0.292010108 0.299955907 0.300093833 0.301000358 0.307094846 0.307781568 0.309832789 0.319844674 0.321342841 0.326404598 0.330086073 0.336406583 0.347738666 0.352021049 0.355631275 0.360557425 0.361612160 0.364111254 0.384498411 0.406930297 0.414405433 0.430254860 0.432616362 0.435308951 0.450801909 0.464634223 0.475685554 0.478818011 0.480335755 0.486704759 0.498896654 0.503869088 0.514929088 0.517552219 0.543779701 0.566919864 0.567682054 0.586540437 0.592187760 0.605713866 0.644159738 0.645376191 0.667968046 0.675661348 0.687371616 0.703588945 0.704347511 0.705887130 0.709381166 0.717173944 0.733998838 0.737994404 0.739683793 0.747957058 0.750780113 0.771610446 0.775981336 0.808840927 0.821796185 0.824003086 0.828934924 0.834202620 0.847139762 0.849416630 0.851415178 0.854509416 0.863287357 0.867470643 0.875785588 0.887455493 0.891059802 0.892398465 0.893430094 0.901913033 0.910336499 0.918187784 0.924166371 0.924722076 0.931929773 0.935586287 0.956056418 0.963683379 0.965193847 0.970111138 0.978128316 0.982499688 0.998628311 1.012955587 1.015756556 1.021607510 1.040126609 1.055071498 1.070532034 1.072442021 1.079439765 1.087351304 1.107692568 1.110377271 1.114757199 1.118804325 1.122576512 1.123743404 1.141863030 1.148840934 1.161749361 1.170155733 1.177124890 1.187242726 1.200751463 1.221726435 1.233334761 1.258112992 1.296451136 1.298213828 1.314717868 1.326482743 1.327467283 1.330202397 1.331376520 1.334738270 1.342118211 1.348755746 1.365416946 1.379986884 1.381287063 1.381813216 1.429213166 1.517199993 1.557983341 1.684717837 1.923131476</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">222</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91614473" y3="-0.95728262" z3="-0.69332851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60306516" y3="-1.94806579" z3="-1.55883824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08469014" y3="-0.9946061" z3="-1.418348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7738671" y3="1.47673525" z3="-1.06359412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28348255" y3="0.30714933" z3="-0.50873954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65489576" y3="2.7366799" z3="-1.15975647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00196376" y3="2.73310906" z3="-0.84358028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37089282" y3="4.98774392" z3="-0.36993485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8047582" y3="3.84931946" z3="-0.89363714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74300548" y3="5.8623181" z3="-0.17160329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09475381" y3="1.61291341" z3="-1.69482246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.11923863" y3="0.35000302" z3="0.20275327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71053819" y3="0.38128801" z3="-0.663234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60138368" y3="0.73044533" z3="0.25950596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66415944" y3="-0.85671741" z3="-1.53079353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09402826" y3="-2.47281419" z3="-1.33558633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.9869475" y3="-5.51609464" z3="-6.27921892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72724924" y3="-5.07615542" z3="-5.31208646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04496079" y3="-3.92148375" z3="-2.85679675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69495252" y3="-3.69465259" z3="-5.17261705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44763284" y3="-5.8968275" z3="-4.21624197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12095422" y3="-5.31346205" z3="-2.99847564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36294017" y3="-3.08567734" z3="-3.95185273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92040535" y3="-3.03199078" z3="-6.01205398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49745667" y3="-6.9852194" z3="-4.30394083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94091678" y3="-5.94178284" z3="-2.12178303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64989997" y3="-3.36642176" z3="-1.61252427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34449075" y3="-3.84677679" z3="-0.8575017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68976989" y3="-4.85017774" z3="-1.12074294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.36934869" y3="-3.54102532" z3="0.59057608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.37886036" y3="-3.06121059" z3="3.34876688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66204009" y3="-4.57612453" z3="1.4874405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10114166" y3="-2.26162923" z3="1.08629432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10288344" y3="-2.02404567" z3="2.45657691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.65806082" y3="-4.33835771" z3="2.86084248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85114039" y3="-5.58605458" z3="1.11140668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0953409" y3="-1.42116808" z3="0.41956497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12062039" y3="-1.01404223" z3="2.81132291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85260381" y3="-5.16257032" z3="3.55184572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.36938376" y3="-2.87804994" z3="4.42728306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3161107" y3="-1.74955678" z3="-3.929241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45558394" y3="-1.33917111" z3="-3.02991439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33575882" y3="3.7096839" z3="-1.06325577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13753485" y3="-2.98300477" z3="-1.70050442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91568077" y3="-3.15231507" z3="-0.55146738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10021656" y3="-2.27103482" z3="0.376374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83178103" y3="-0.70664501" z3="0.62734071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7100365" y3="-0.25200634" z3="-0.95396241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52338033" y3="0.47760858" z3="1.19575805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05812421" y3="-1.04097752" z3="2.00018759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39862158" y3="-4.36151822" z3="-0.3044839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10480903" y3="-4.59212872" z3="0.90506333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01827661" y3="0.03138549" z3="-1.76204318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36505456" y3="0.61883729" z3="-0.76997367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3426044" y3="-1.08250061" z3="-1.31535827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6425445" y3="0.58047093" z3="0.53587334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14713689" y3="0.17849709" z3="2.18970581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99500358" y3="1.47250615" z3="1.29684007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51790719" y3="-0.0923149" z3="2.33164896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87277682" y3="-1.71263724" z3="1.67778877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55674652" y3="-1.49537087" z3="2.87313413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.03984303" y3="-4.00868951" z3="0.92694783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48485724" y3="-4.33311439" z3="1.77738221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33706118" y3="-5.665414" z3="0.90826127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27840578" y3="-2.20133727" z3="-0.18867307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13649625" y3="-3.2973953" z3="-1.05179535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49638719" y3="-4.45884921" z3="-0.63609871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00396175" y3="-4.51934625" z3="0.66214119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15068745" y3="-3.46183675" z3="1.55475219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78084362" y3="-2.30261412" z3="1.12023074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49113525" y3="-3.2229997" z3="-2.08306055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35499568" y3="-5.29813973" z3="-1.31736805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27237346" y3="-5.71124394" z3="1.09286011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74649394" y3="-3.54617571" z3="2.56461711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87300436" y3="-1.45543467" z3="1.80139232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50305399" y3="4.02655492" z3="0.01302857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8729791" y3="3.81291212" z3="-0.0579288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40252745" y3="3.2831224" z3="-1.2297461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60361551" y3="2.99207363" z3="-2.33321011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23356156" y3="3.20285537" z3="-2.24045379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06474635" y3="4.39639075" z3="0.9437151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52839683" y3="4.02970312" z3="0.78563284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83696685" y3="2.99229441" z3="-1.29356545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05600774" y3="2.5894521" z3="-3.24005339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40665528" y3="2.94990813" z3="-3.08785452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18500457" y3="-5.92646422" z3="2.28062443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77647158" y3="-6.41242821" z3="0.22986868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31155193" y3="2.70161762" z3="-2.37014351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.47175349" y3="3.03963079" z3="-0.2565916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62786757" y3="0.16943765" z3="-2.02117741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95230039" y3="1.41589368" z3="-1.87685511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81149309" y3="0.10307502" z3="-2.80702063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29296778" y3="1.21508122" z3="-3.45219996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32640789" y3="-0.85814264" z3="-2.89859514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20094929" y3="1.15179852" z3="-4.05826252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45976078" y3="2.54174889" z3="-2.58418271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59822503" y3="2.4440233" z3="-3.34762252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92900392" y3="3.49390623" z3="-2.52326031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96702074" y3="3.32254613" z3="-3.88457285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57032065" y3="3.89925111" z3="-0.23276616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7490822" y3="5.04808478" z3="-0.03709939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9157443" y3="3.94991179" z3="0.22903731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42668658" y3="5.09055064" z3="0.80054167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54696312" y3="3.06445856" z3="0.13218734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46322658" y3="5.1034661" z3="1.14910588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31058221" y3="6.21852609" z3="0.54446148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62198527" y3="6.24574899" z3="0.94917852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67091247" y3="7.09678576" z3="0.67571799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04218752" y3="7.14937916" z3="1.39958488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36466679" y3="-3.93724273" z3="-2.8560982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54496595" y3="-4.97060179" z3="-2.52313781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24156298" y3="-3.61655657" z3="-3.44976434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49444777" y3="-3.93604542" z3="-3.5313613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70116044" y3="-1.59777325" z3="-2.09481739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44094148" y3="-1.12821283" z3="-2.76806084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53166927" y3="-0.92956104" z3="-1.23562464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75424227" y3="-1.64492857" z3="-2.65634386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9161,-.9573,-.6933;6.6031,-1.9481,-1.5588;6.0847,-.9946,-1.4183;4.7739,1.4767,-1.0636;4.2835,.3071,-.5087;2.6549,2.7367,-1.1598;4.002,2.7331,-.8436;2.3709,4.9877,-.3699;1.8048,3.8493,-.8936;1.743,5.8623,-.1716;2.0948,1.6129,-1.6948;3.1192,.35,.2028;1.7105,.3813,-.6632;.6014,.7304,.2595;1.6642,-.8567,-1.5308;1.094,-2.4728,-1.3356;1.9869,-5.5161,-6.2792;1.7272,-5.0762,-5.3121;1.045,-3.9215,-2.8568;1.695,-3.6947,-5.1726;1.4476,-5.8968,-4.2162;1.121,-5.3135,-2.9985;1.3629,-3.0857,-3.9519;1.9204,-3.032,-6.0121;1.4975,-6.9852,-4.3039;.9409,-5.9418,-2.1218;.6499,-3.3664,-1.6125;-.3445,-3.8468,-.8575;-.6898,-4.8502,-1.1207;-.3693,-3.541,.5906;-.3789,-3.0612,3.3488;-.662,-4.5761,1.4874;-.1011,-2.2616,1.0863;-.1029,-2.024,2.4566;-.6581,-4.3384,2.8608;-.8511,-5.5861,1.1114;.0953,-1.4212,.4196;.1206,-1.014,2.8113;-.8526,-5.1626,3.5518;-.3694,-2.878,4.4273;1.3161,-1.7496,-3.9292;1.4556,-1.3392,-3.0299;.3358,3.7097,-1.0633;-2.1375,-2.983,-1.7005;-2.9157,-3.1523,-.5515;-3.1002,-2.271,.3764;-3.8318,-.7066,.6273;-4.71,-.252,-.954;-2.5234,.4776,1.1958;-5.0581,-1.041,2.0002;-3.3986,-4.3615,-.3045;-4.1048,-4.5921,.9051;-4.0183,.0314,-1.762;-5.3651,.6188,-.77;-5.3426,-1.0825,-1.3154;-1.6425,.5805,.5359;-2.1471,.1785,2.1897;-2.995,1.4725,1.2968;-5.5179,-.0923,2.3316;-5.8728,-1.7126,1.6778;-4.5567,-1.4954,2.8731;-5.0398,-4.0087,.9269;-3.4849,-4.3331,1.7774;-4.3371,-5.6654,.9083;4.2784,-2.2013,-.1887;4.1365,-3.2974,-1.0518;3.4964,-4.4588,-.6361;3.004,-4.5193,.6621;3.1507,-3.4618,1.5548;3.7808,-2.3026,1.1202;4.4911,-3.223,-2.0831;3.355,-5.2981,-1.3174;2.2724,-5.7112,1.0929;2.7465,-3.5462,2.5646;3.873,-1.4554,1.8014;-.5031,4.0266,.013;-1.873,3.8129,-.0579;-2.4025,3.2831,-1.2297;-1.6036,2.9921,-2.3332;-.2336,3.2029,-2.2405;-.0647,4.3964,.9437;-2.5284,4.0297,.7856;-3.837,2.9923,-1.2936;-2.056,2.5895,-3.2401;.4067,2.9499,-3.0879;2.185,-5.9265,2.2806;1.7765,-6.4124,.2299;-4.3116,2.7016,-2.3701;-4.4718,3.0396,-.2566;6.6279,.1694,-2.0212;5.9523,1.4159,-1.8769;7.8115,.1031,-2.807;8.293,1.2151,-3.4522;8.3264,-.8581,-2.8986;9.2009,1.1518,-4.0583;6.4598,2.5417,-2.5842;7.5982,2.444,-3.3476;5.929,3.4939,-2.5233;7.967,3.3225,-3.8846;4.5703,3.8993,-.2328;3.7491,5.0481,-.0371;5.9157,3.9499,.229;6.4267,5.0906,.8005;6.547,3.0645,.1322;7.4632,5.1035,1.1491;4.3106,6.2185,.5445;5.622,6.2457,.9492;3.6709,7.0968,.6757;6.0422,7.1494,1.3996;-2.3647,-3.9372,-2.8561;-2.545,-4.9706,-2.5231;-3.2416,-3.6166,-3.4498;-1.4944,-3.936,-3.5314;-1.7012,-1.5978,-2.0948;-2.4409,-1.1282,-2.7681;-1.5317,-.9296,-1.2356;-.7542,-1.6449,-2.6563;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662916039655</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001862707501 0.000224094873 0.020283967190 0.005337851621</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057080048 -0.000278237 0.000095965 0.000323004 0.000382494 0.000424499 0.000482971 0.000521388 0.000656207 0.000751614 0.000860651 0.000990575 0.001156709 0.001206884 0.001353644 0.001410760 0.001532397 0.001804116 0.002230300 0.002370820 0.002512734 0.002626703 0.002853068 0.003515423 0.003635350 0.003860822 0.004362348 0.004712100 0.004814834 0.005048768 0.005231521 0.005357970 0.006330728 0.006355264 0.006733220 0.006993357 0.007215680 0.007583735 0.008177872 0.008680205 0.008897923 0.009452882 0.009790643 0.010438147 0.011162761 0.011332474 0.011808916 0.012529839 0.013341984 0.013684304 0.014001540 0.014630656 0.014982131 0.015471554 0.015832561 0.016609459 0.017115335 0.018570239 0.018890706 0.019440520 0.020355475 0.020646086 0.021490901 0.021880148 0.022436843 0.022774640 0.023442623 0.023868639 0.024515183 0.025871101 0.026580363 0.026921390 0.027274020 0.027602933 0.028201576 0.029104811 0.030885003 0.031519509 0.032982231 0.034073148 0.034651639 0.035958971 0.039043183 0.039499044 0.041962890 0.045399353 0.046162379 0.047003439 0.048790092 0.049689708 0.049865517 0.050798441 0.051536129 0.052172776 0.052287235 0.052406511 0.052747322 0.053540790 0.054920776 0.056059732 0.056411392 0.056707647 0.057005085 0.057302565 0.057767330 0.058587327 0.059226603 0.059705340 0.061263012 0.062034645 0.062822384 0.064226906 0.064549582 0.065001155 0.066006545 0.067467106 0.067949634 0.068934819 0.070525566 0.072133720 0.072623520 0.072899705 0.073443442 0.075690865 0.078566284 0.080834831 0.081630446 0.083348135 0.084668031 0.088494155 0.089007475 0.089374969 0.089856007 0.091305878 0.093311709 0.094577186 0.095482603 0.096189743 0.096853136 0.098416009 0.100152344 0.100697698 0.102626315 0.103729881 0.104175894 0.106409684 0.108798478 0.110854325 0.112209219 0.112818580 0.113791985 0.114724306 0.116926413 0.117165120 0.118601667 0.119271331 0.120579147 0.122161650 0.125192089 0.125718870 0.128493670 0.128985115 0.130959157 0.133591520 0.136337426 0.137730110 0.138645592 0.139620657 0.140519975 0.143474343 0.144645223 0.145903850 0.146767271 0.151977373 0.153631398 0.154324400 0.160872573 0.161502194 0.168505288 0.171440359 0.175936966 0.179076554 0.181582804 0.184315271 0.189050825 0.189827667 0.191872818 0.201270577 0.202207607 0.206284262 0.206948673 0.207257647 0.212288440 0.212570375 0.215343873 0.217072773 0.220332553 0.221013503 0.223060547 0.224564788 0.225623344 0.231849824 0.234539136 0.235434279 0.238493309 0.246452369 0.249288272 0.251833155 0.256530217 0.257204646 0.258261738 0.262517196 0.271572282 0.282868564 0.292010786 0.299955876 0.300093945 0.301001119 0.307094928 0.307781564 0.309837833 0.319846683 0.321344351 0.326404626 0.330088691 0.336432794 0.347741430 0.352021209 0.355631546 0.360558858 0.361612138 0.364112454 0.384498355 0.406930400 0.414405481 0.430257206 0.432618741 0.435327903 0.450801889 0.464634233 0.475701025 0.478818432 0.480335750 0.486709367 0.498897676 0.503874150 0.514960737 0.517580635 0.543779707 0.566923320 0.567682031 0.586542020 0.592187441 0.605716003 0.644161749 0.645381305 0.667970523 0.675663286 0.687374716 0.703588743 0.704347871 0.705891245 0.709406440 0.717175462 0.734001402 0.737997880 0.739688360 0.747956944 0.750781488 0.771610676 0.775981490 0.808841115 0.821796229 0.824021806 0.828935042 0.834205049 0.847140876 0.849417410 0.851417713 0.854509888 0.863289679 0.867470669 0.875800840 0.887455560 0.891059979 0.892398194 0.893433940 0.901964596 0.910351049 0.918189846 0.924183035 0.924723386 0.931933859 0.935586411 0.956057765 0.963696759 0.965194988 0.970111855 0.978127755 0.982507992 0.998628834 1.012959077 1.015780115 1.021619330 1.040132711 1.055071605 1.070564826 1.072442191 1.079440308 1.087354865 1.107820058 1.110381098 1.115064623 1.118818118 1.122584013 1.123766809 1.141863527 1.148846211 1.161749387 1.170161956 1.177162940 1.187247210 1.200753881 1.221752777 1.233457056 1.258119249 1.296451357 1.298230568 1.314719740 1.326483353 1.327469199 1.330202396 1.331376830 1.334764944 1.342118171 1.348765344 1.365418490 1.379991205 1.381292817 1.381817146 1.429213987 1.517222402 1.557985075 1.684725034 1.923135144</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">223</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91576784" y3="-0.95657411" z3="-0.69367098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60081126" y3="-1.94822032" z3="-1.56193103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08281686" y3="-0.99457793" z3="-1.42113292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77279695" y3="1.47705591" z3="-1.06567655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28348067" y3="0.308034" z3="-0.50882071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65379288" y3="2.73717371" z3="-1.15745824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00162509" y3="2.73363625" z3="-0.8446235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.372166" y3="4.98839015" z3="-0.367113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8047231" y3="3.84990861" z3="-0.88945907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74495119" y3="5.86275192" z3="-0.16822628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09218159" y3="1.61335875" z3="-1.69089879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1207133" y3="0.35166071" z3="0.20498217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71012482" y3="0.38230468" z3="-0.65785933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60298372" y3="0.7319553" z3="0.26706494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66179675" y3="-0.85637142" z3="-1.52425131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09366601" y3="-2.47447964" z3="-1.33192333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0000976" y3="-5.51487672" z3="-6.27409418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73733857" y3="-5.07551518" z3="-5.30754684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04796863" y3="-3.92267429" z3="-2.85345232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70481398" y3="-3.69445359" z3="-5.16691856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45376445" y3="-5.89671028" z3="-4.21353074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12345307" y3="-5.31418835" z3="-2.99641782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36912182" y3="-3.08626581" z3="-3.94677121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93304991" y3="-3.03133946" z3="-6.00489568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50366265" y3="-6.98481111" z3="-4.30198803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94028562" y3="-5.94303047" z3="-2.12117912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65093658" y3="-3.36885088" z3="-1.609365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3446896" y3="-3.84908157" z3="-0.85642432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68945654" y3="-4.85212444" z3="-1.12061245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37165083" y3="-3.54366725" z3="0.59149695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38490877" y3="-3.06307877" z3="3.34910482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66688283" y3="-4.57801494" z3="1.48779996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10338062" y3="-2.26404737" z3="1.08724595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10700784" y3="-2.02597231" z3="2.45723784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66474754" y3="-4.33990659" z3="2.86101681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85670288" y3="-5.58737844" z3="1.11147626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09473635" y3="-1.42404674" z3="0.42030668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11709302" y3="-1.01652507" z3="2.81220954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86050424" y3="-5.1640242" z3="3.55236006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.37667841" y3="-2.87998685" z3="4.42751898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32229734" y3="-1.75038576" z3="-3.9233099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45908622" y3="-1.34043545" z3="-3.02352022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33532343" y3="3.71099403" z3="-1.05598678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13599853" y3="-2.98539878" z3="-1.7023503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91564553" y3="-3.15441175" z3="-0.5540485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10206287" y3="-2.27271775" z3="0.37304702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83291991" y3="-0.707144" z3="0.62105352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70280564" y3="-0.24839219" z3="-0.96451408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52376287" y3="0.47252981" z3="1.19827883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06895423" y3="-1.04042113" z3="1.98670448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39798998" y3="-4.36378172" z3="-0.30711499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10435141" y3="-4.59548988" z3="0.90228094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00655897" y3="0.04358502" z3="-1.76662947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36466962" y3="0.61744983" z3="-0.77980942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32834429" y3="-1.08073705" z3="-1.33562277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64028859" y3="0.57580504" z3="0.54216519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15226862" y3="0.16959189" z3="2.1926774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99361003" y3="1.46856626" z3="1.29995858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52961311" y3="-0.09119491" z3="2.31568023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88299209" y3="-1.71043095" z3="1.65750481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57410143" y3="-1.49691232" z3="2.86244084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04079399" y3="-4.01398845" z3="0.92295935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.48534645" y3="-4.3348666" z3="1.77477139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33453064" y3="-5.66934538" z3="0.90585535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27865611" y3="-2.20019295" z3="-0.18728133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13638285" y3="-3.29713168" z3="-1.04938912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49616139" y3="-4.4581545" z3="-0.63258643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.0032986" y3="-4.51696704" z3="0.66553384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15070104" y3="-3.45862725" z3="1.55730257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78155945" y3="-2.30020101" z3="1.12192143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49076066" y3="-3.22386178" z3="-2.08083812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35545018" y3="-5.29882008" z3="-1.31292658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.27106204" y3="-5.7083503" z3="1.09736592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74667436" y3="-3.54197825" z3="2.5672857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8745831" y3="-1.45277311" z3="1.80260163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.50010465" y3="4.02417025" z3="0.02537427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.87107328" y3="3.81496745" z3="-0.04594136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40393992" y3="3.28889582" z3="-1.2175982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60749087" y3="2.99818851" z3="-2.32199494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23755152" y3="3.20808623" z3="-2.23341428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05981344" y3="4.39226535" z3="0.95483322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52381421" y3="4.03008166" z3="0.80093835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83927493" y3="3.00167749" z3="-1.27941626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06284185" y3="2.59921703" z3="-3.22929353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40053841" y3="2.9557862" z3="-3.08132531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.18228266" y3="-5.92170548" z3="2.28561318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77641784" y3="-6.41127003" z3="0.23501319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31739102" y3="2.71822966" z3="-2.35675482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4713648" y3="3.04492733" z3="-0.24057948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62464757" y3="0.16882967" z3="-2.02630359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94934119" y3="1.41544896" z3="-1.88155978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80636526" y3="0.10163945" z3="-2.81507377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28594696" y3="1.21292144" z3="-3.46282834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32124313" y3="-0.85967593" z3="-2.90691965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19235387" y3="1.14891869" z3="-4.07131076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45490395" y3="2.54066981" z3="-2.59119955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59132446" y3="2.44206962" z3="-3.35767041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92426494" y3="3.49302061" z3="-2.52940648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95854153" y3="3.3200049" z3="-3.89661848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57178831" y3="3.89986882" z3="-0.23571642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75120787" y3="5.04888938" z3="-0.03812548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91860566" y3="3.95047252" z3="0.22227048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43131148" y3="5.09130258" z3="0.79155232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.54951728" y3="3.06495942" z3="0.1242229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46884764" y3="5.10412225" z3="1.13726651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31459864" y3="6.219556" z3="0.54080616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6272825" y3="6.24672499" z3="0.94163227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67556921" y3="7.09804747" z3="0.67303931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04898928" y3="7.15054345" z3="1.3900157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36139913" y3="-3.94024316" z3="-2.85799315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54447712" y3="-4.9731155" z3="-2.52400499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23585153" y3="-3.6182563" z3="-3.45443871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48953367" y3="-3.94136437" z3="-3.53141519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69737771" y3="-1.60111177" z3="-2.0966739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43509575" y3="-1.13022565" z3="-2.77156611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52896953" y3="-0.93385357" z3="-1.23695471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75035959" y3="-1.64986053" z3="-2.65756014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9158,-.9566,-.6937;6.6008,-1.9482,-1.5619;6.0828,-.9946,-1.4211;4.7728,1.4771,-1.0657;4.2835,.308,-.5088;2.6538,2.7372,-1.1575;4.0016,2.7336,-.8446;2.3722,4.9884,-.3671;1.8047,3.8499,-.8895;1.745,5.8628,-.1682;2.0922,1.6134,-1.6909;3.1207,.3517,.205;1.7101,.3823,-.6579;.603,.732,.2671;1.6618,-.8564,-1.5243;1.0937,-2.4745,-1.3319;2.0001,-5.5149,-6.2741;1.7373,-5.0755,-5.3075;1.048,-3.9227,-2.8535;1.7048,-3.6945,-5.1669;1.4538,-5.8967,-4.2135;1.1235,-5.3142,-2.9964;1.3691,-3.0863,-3.9468;1.933,-3.0313,-6.0049;1.5037,-6.9848,-4.302;.9403,-5.943,-2.1212;.6509,-3.3689,-1.6094;-.3447,-3.8491,-.8564;-.6895,-4.8521,-1.1206;-.3717,-3.5437,.5915;-.3849,-3.0631,3.3491;-.6669,-4.578,1.4878;-.1034,-2.264,1.0872;-.107,-2.026,2.4572;-.6647,-4.3399,2.861;-.8567,-5.5874,1.1115;.0947,-1.424,.4203;.1171,-1.0165,2.8122;-.8605,-5.164,3.5524;-.3767,-2.88,4.4275;1.3223,-1.7504,-3.9233;1.4591,-1.3404,-3.0235;.3353,3.711,-1.056;-2.136,-2.9854,-1.7024;-2.9156,-3.1544,-.554;-3.1021,-2.2727,.373;-3.8329,-.7071,.6211;-4.7028,-.2484,-.9645;-2.5238,.4725,1.1983;-5.069,-1.0404,1.9867;-3.398,-4.3638,-.3071;-4.1044,-4.5955,.9023;-4.0066,.0436,-1.7666;-5.3647,.6174,-.7798;-5.3283,-1.0807,-1.3356;-1.6403,.5758,.5422;-2.1523,.1696,2.1927;-2.9936,1.4686,1.3;-5.5296,-.0912,2.3157;-5.883,-1.7104,1.6575;-4.5741,-1.4969,2.8624;-5.0408,-4.014,.923;-3.4853,-4.3349,1.7748;-4.3345,-5.6693,.9059;4.2787,-2.2002,-.1873;4.1364,-3.2971,-1.0494;3.4962,-4.4582,-.6326;3.0033,-4.517,.6655;3.1507,-3.4586,1.5573;3.7816,-2.3002,1.1219;4.4908,-3.2239,-2.0808;3.3555,-5.2988,-1.3129;2.2711,-5.7084,1.0974;2.7467,-3.542,2.5673;3.8746,-1.4528,1.8026;-.5001,4.0242,.0254;-1.8711,3.815,-.0459;-2.4039,3.2889,-1.2176;-1.6075,2.9982,-2.322;-.2376,3.2081,-2.2334;-.0598,4.3923,.9548;-2.5238,4.0301,.8009;-3.8393,3.0017,-1.2794;-2.0628,2.5992,-3.2293;.4005,2.9558,-3.0813;2.1823,-5.9217,2.2856;1.7764,-6.4113,.235;-4.3174,2.7182,-2.3568;-4.4714,3.0449,-.2406;6.6246,.1688,-2.0263;5.9493,1.4154,-1.8816;7.8064,.1016,-2.8151;8.2859,1.2129,-3.4628;8.3212,-.8597,-2.9069;9.1924,1.1489,-4.0713;6.4549,2.5407,-2.5912;7.5913,2.4421,-3.3577;5.9243,3.493,-2.5294;7.9585,3.32,-3.8966;4.5718,3.8999,-.2357;3.7512,5.0489,-.0381;5.9186,3.9505,.2223;6.4313,5.0913,.7916;6.5495,3.065,.1242;7.4688,5.1041,1.1373;4.3146,6.2196,.5408;5.6273,6.2467,.9416;3.6756,7.098,.673;6.049,7.1505,1.39;-2.3614,-3.9402,-2.858;-2.5445,-4.9731,-2.524;-3.2359,-3.6183,-3.4544;-1.4895,-3.9414,-3.5314;-1.6974,-1.6011,-2.0967;-2.4351,-1.1302,-2.7716;-1.529,-.9339,-1.237;-.7504,-1.6499,-2.6576;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662920538740</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001367253993 0.000169749295 0.020130846122 0.005340034127</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057082032 -0.000197864 0.000070598 0.000326498 0.000384220 0.000424259 0.000486953 0.000522616 0.000656637 0.000754606 0.000860960 0.000991593 0.001158535 0.001210754 0.001355743 0.001411265 0.001532921 0.001804865 0.002230568 0.002370966 0.002526376 0.002629396 0.002853013 0.003515405 0.003635267 0.003861166 0.004363276 0.004713092 0.004817383 0.005049023 0.005238812 0.005360706 0.006335062 0.006367648 0.006733305 0.006997690 0.007217142 0.007588047 0.008178121 0.008683509 0.008898717 0.009467205 0.009791308 0.010452123 0.011164550 0.011330833 0.011812754 0.012529940 0.013341968 0.013686057 0.014003787 0.014630577 0.014985000 0.015471662 0.015833416 0.016610416 0.017115442 0.018571314 0.018891060 0.019441325 0.020355532 0.020647632 0.021493151 0.021880689 0.022439447 0.022774609 0.023443041 0.023868847 0.024515194 0.025871228 0.026580721 0.026921425 0.027274008 0.027603165 0.028202904 0.029104758 0.030888024 0.031520004 0.032983528 0.034073644 0.034651930 0.035959294 0.039044336 0.039499485 0.041963169 0.045399294 0.046163326 0.047011040 0.048791953 0.049690350 0.049865503 0.050798444 0.051536129 0.052172757 0.052287250 0.052406522 0.052747935 0.053541873 0.054920778 0.056060819 0.056412213 0.056708104 0.057005142 0.057305642 0.057767552 0.058587532 0.059226666 0.059705368 0.061263304 0.062035436 0.062835875 0.064227010 0.064554073 0.065001165 0.066006658 0.067469522 0.067950890 0.068935005 0.070526172 0.072134609 0.072623651 0.072900146 0.073446131 0.075691216 0.078566448 0.080836401 0.081630288 0.083348417 0.084667576 0.088496211 0.089011311 0.089375435 0.089855998 0.091305855 0.093312180 0.094577812 0.095483536 0.096189801 0.096853136 0.098416172 0.100153732 0.100697862 0.102628816 0.103730746 0.104176627 0.106414798 0.108800619 0.110854449 0.112210649 0.112818799 0.113793034 0.114725060 0.116926497 0.117165260 0.118601744 0.119274058 0.120579152 0.122177120 0.125192453 0.125723192 0.128493714 0.128985807 0.130961997 0.133598164 0.136338154 0.137731610 0.138645823 0.139621331 0.140521884 0.143474418 0.144647041 0.145904263 0.146768873 0.151978723 0.153630394 0.154324406 0.160872462 0.161511527 0.168505471 0.171442197 0.175943565 0.179078895 0.181590227 0.184315091 0.189055407 0.189827717 0.191873422 0.201270983 0.202208626 0.206284346 0.206949049 0.207257715 0.212289172 0.212572128 0.215361861 0.217072461 0.220332610 0.221019129 0.223245104 0.224564912 0.225640513 0.231850250 0.234539191 0.235438087 0.238496789 0.246458053 0.249315174 0.251839955 0.256531010 0.257205213 0.258262699 0.262519054 0.271573272 0.282868646 0.292011756 0.299956558 0.300093917 0.301001921 0.307095655 0.307781593 0.309838734 0.319851441 0.321345073 0.326404596 0.330094902 0.336438652 0.347742196 0.352021811 0.355631629 0.360560113 0.361612137 0.364112629 0.384498175 0.406930309 0.414407466 0.430259575 0.432621433 0.435341212 0.450801880 0.464634909 0.475705242 0.478819103 0.480335820 0.486710541 0.498897803 0.503876794 0.514977625 0.517599399 0.543779685 0.566925461 0.567682076 0.586542612 0.592187621 0.605717313 0.644161848 0.645385920 0.667971002 0.675664674 0.687375255 0.703591725 0.704349046 0.705894154 0.709435934 0.717175567 0.734001634 0.737999544 0.739697002 0.747956642 0.750782565 0.771610766 0.775981538 0.808845623 0.821796273 0.824033563 0.828935284 0.834206448 0.847141349 0.849417814 0.851419053 0.854510686 0.863290941 0.867470695 0.875810703 0.887455572 0.891060138 0.892397970 0.893445952 0.901989990 0.910356205 0.918193164 0.924188168 0.924723709 0.931935180 0.935587416 0.956057863 0.963702294 0.965195797 0.970112391 0.978127277 0.982514246 0.998629631 1.012966733 1.015790365 1.021629815 1.040137869 1.055072118 1.070593702 1.072442548 1.079442007 1.087357316 1.107882071 1.110383388 1.115246433 1.118822883 1.122587982 1.123779280 1.141863682 1.148847379 1.161749392 1.170164622 1.177178279 1.187249313 1.200755077 1.221764759 1.233529823 1.258124639 1.296451592 1.298240228 1.314720417 1.326483314 1.327470835 1.330202265 1.331376925 1.334771318 1.342118424 1.348767315 1.365418660 1.379992214 1.381299099 1.381818608 1.429213797 1.517236211 1.557985938 1.684729617 1.923166179</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">224</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91505251" y3="-0.95644119" z3="-0.69004584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59936189" y3="-1.94988244" z3="-1.55754184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08157196" y3="-0.99594843" z3="-1.41822816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77231481" y3="1.47661708" z3="-1.06653085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28344144" y3="0.30873441" z3="-0.50670212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6536888" y3="2.73821048" z3="-1.1555616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00244457" y3="2.73419631" z3="-0.84627295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37584099" y3="4.99165808" z3="-0.37045448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80619935" y3="3.85224124" z3="-0.88796095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74959535" y3="5.86697223" z3="-0.17145456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08935682" y3="1.61419121" z3="-1.68551559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12202651" y3="0.35397137" z3="0.20921023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70968991" y3="0.38372608" z3="-0.65085744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60419583" y3="0.73276854" z3="0.27629653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65996313" y3="-0.85506037" z3="-1.51725099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09353282" y3="-2.47272712" z3="-1.32914464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00976295" y3="-5.50649291" z3="-6.27352493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74537639" y3="-5.06868237" z3="-5.30673997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05167708" y3="-3.91944472" z3="-2.85217149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71239979" y3="-3.6877316" z3="-5.16427924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46030195" y3="-5.89156165" z3="-4.21423686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12793908" y3="-5.31088594" z3="-2.99679545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37461979" y3="-3.08138823" z3="-3.9438089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94186706" y3="-3.02335892" z3="-6.00103296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51042288" y3="-6.97957543" z3="-4.30417555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94347865" y3="-5.94106364" z3="-2.12258878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65202121" y3="-3.36707029" z3="-1.60835258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34416624" y3="-3.84929702" z3="-0.85691751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68706103" y3="-4.85319819" z3="-1.12118742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37390735" y3="-3.54309907" z3="0.59098316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39163474" y3="-3.06122706" z3="3.34881971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67102001" y3="-4.57721879" z3="1.48757537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10542436" y3="-2.263653" z3="1.08678424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11101987" y3="-2.0249683" z3="2.45685923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67122777" y3="-4.33838056" z3="2.86082065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86011924" y3="-5.58724581" z3="1.1116435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09500195" y3="-1.42423555" z3="0.4200189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11320735" y3="-1.01516008" z3="2.81152792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86929992" y3="-5.16188468" z3="3.55185024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38535576" y3="-2.87732775" z3="4.42724757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32760348" y3="-1.74550129" z3="-3.91867175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46188893" y3="-1.3364534" z3="-3.01797862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33623539" y3="3.71311257" z3="-1.05013057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13554705" y3="-2.98822846" z3="-1.70631202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9171559" y3="-3.15907192" z3="-0.55961381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10550163" y3="-2.27815982" z3="0.36786252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83536918" y3="-0.71328041" z3="0.61867391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70195059" y3="-0.24978593" z3="-0.96688219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52778978" y3="0.46495748" z3="1.20144476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07387959" y3="-1.05060987" z3="1.97986346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39964063" y3="-4.36873508" z3="-0.31463683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10848864" y3="-4.60072987" z3="0.89345963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00578697" y3="0.04880516" z3="-1.76579169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36669205" y3="0.6128746" z3="-0.77944682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32411921" y3="-1.08179781" z3="-1.34302794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64195889" y3="0.56848343" z3="0.54824917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15989433" y3="0.16011196" z3="2.19685296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99713817" y3="1.46063805" z3="1.30398849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53537509" y3="-0.1026973" z3="2.31084061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88646423" y3="-1.71976192" z3="1.64709935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58136716" y3="-1.50939502" z3="2.85545146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04389979" y3="-4.01834708" z3="0.91355208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49113421" y3="-4.3414784" z3="1.7674482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3396236" y3="-5.67414096" z3="0.89538654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27772097" y3="-2.19939366" z3="-0.18212862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13533875" y3="-3.29686689" z3="-1.04342201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49449146" y3="-4.45722188" z3="-0.62598862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00121282" y3="-4.51513021" z3="0.67199808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14894164" y3="-3.45645798" z3="1.5631083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78028923" y3="-2.29844378" z3="1.12702919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4900292" y3="-3.22447743" z3="-2.07481716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35303906" y3="-5.29757734" z3="-1.30593206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26775899" y3="-5.70551991" z3="1.10380343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74443963" y3="-3.53883919" z3="2.57299693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87333387" y3="-1.45054625" z3="1.80710942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4963182" y3="4.0234991" z3="0.03315829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86691643" y3="3.81190168" z3="-0.0324552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.403004" y3="3.28996366" z3="-1.20473748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61012849" y3="3.00445872" z3="-2.31388813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23948078" y3="3.21322619" z3="-2.22709725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05276858" y3="4.38821587" z3="0.96316293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51757585" y3="4.02407321" z3="0.81628201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83849645" y3="3.00326428" z3="-1.26408677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06791159" y3="2.60869512" z3="-3.22114882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39581281" y3="2.96552715" z3="-3.07957396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17830619" y3="-5.91855803" z3="2.29184332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7724544" y3="-6.40767533" z3="0.24125088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31889252" y3="2.72328449" z3="-2.3410716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46846414" y3="3.04374826" z3="-0.22386367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62300008" y3="0.16615987" z3="-2.02624308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9477479" y3="1.4130035" z3="-1.88397807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80422726" y3="0.09722982" z3="-2.81546174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28335527" y3="1.20703802" z3="-3.466166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31909816" y3="-0.86422888" z3="-2.90511934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18948917" y3="1.14179829" z3="-4.07476986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45251138" y3="2.53638046" z3="-2.5972103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5884582" y3="2.43614877" z3="-3.36402748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92163091" y3="3.48858565" z3="-2.53810071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95511692" y3="3.31277412" z3="-3.90557815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57506308" y3="3.90168876" z3="-0.24191881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75601586" y3="5.05194172" z3="-0.04562483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92301383" y3="3.95263093" z3="0.21266711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43831691" y3="5.09480085" z3="0.77695387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55280344" y3="3.06628132" z3="0.11618048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47675279" y3="5.10785348" z3="1.11995648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32193371" y3="6.22389334" z3="0.52831563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63572084" y3="6.2513665" z3="0.92545941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68383474" y3="7.10326304" z3="0.66000134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05940457" y3="7.15625597" z3="1.36988486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35774011" y3="-3.94162193" z3="-2.86353811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53989395" y3="-4.97531446" z3="-2.53230068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23201836" y3="-3.62020972" z3="-3.46107373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48462593" y3="-3.93968203" z3="-3.53508792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69983867" y3="-1.60194326" z3="-2.09802292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43879743" y3="-1.13167481" z3="-2.77173703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53245474" y3="-0.93534365" z3="-1.2372511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75174218" y3="-1.64744364" z3="-2.65776451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9151,-.9564,-.69;6.5994,-1.9499,-1.5575;6.0816,-.9959,-1.4182;4.7723,1.4766,-1.0665;4.2834,.3087,-.5067;2.6537,2.7382,-1.1556;4.0024,2.7342,-.8463;2.3758,4.9917,-.3705;1.8062,3.8522,-.888;1.7496,5.867,-.1715;2.0894,1.6142,-1.6855;3.122,.354,.2092;1.7097,.3837,-.6509;.6042,.7328,.2763;1.66,-.8551,-1.5173;1.0935,-2.4727,-1.3291;2.0098,-5.5065,-6.2735;1.7454,-5.0687,-5.3067;1.0517,-3.9194,-2.8522;1.7124,-3.6877,-5.1643;1.4603,-5.8916,-4.2142;1.1279,-5.3109,-2.9968;1.3746,-3.0814,-3.9438;1.9419,-3.0234,-6.001;1.5104,-6.9796,-4.3042;.9435,-5.9411,-2.1226;.652,-3.3671,-1.6084;-.3442,-3.8493,-.8569;-.6871,-4.8532,-1.1212;-.3739,-3.5431,.591;-.3916,-3.0612,3.3488;-.671,-4.5772,1.4876;-.1054,-2.2637,1.0868;-.111,-2.025,2.4569;-.6712,-4.3384,2.8608;-.8601,-5.5872,1.1116;.095,-1.4242,.42;.1132,-1.0152,2.8115;-.8693,-5.1619,3.5519;-.3854,-2.8773,4.4272;1.3276,-1.7455,-3.9187;1.4619,-1.3365,-3.018;.3362,3.7131,-1.0501;-2.1355,-2.9882,-1.7063;-2.9172,-3.1591,-.5596;-3.1055,-2.2782,.3679;-3.8354,-.7133,.6187;-4.702,-.2498,-.9669;-2.5278,.465,1.2014;-5.0739,-1.0506,1.9799;-3.3996,-4.3687,-.3146;-4.1085,-4.6007,.8935;-4.0058,.0488,-1.7658;-5.3667,.6129,-.7794;-5.3241,-1.0818,-1.343;-1.642,.5685,.5482;-2.1599,.1601,2.1969;-2.9971,1.4606,1.304;-5.5354,-.1027,2.3108;-5.8865,-1.7198,1.6471;-4.5814,-1.5094,2.8555;-5.0439,-4.0183,.9136;-3.4911,-4.3415,1.7674;-4.3396,-5.6741,.8954;4.2777,-2.1994,-.1821;4.1353,-3.2969,-1.0434;3.4945,-4.4572,-.626;3.0012,-4.5151,.672;3.1489,-3.4565,1.5631;3.7803,-2.2984,1.127;4.49,-3.2245,-2.0748;3.353,-5.2976,-1.3059;2.2678,-5.7055,1.1038;2.7444,-3.5388,2.573;3.8733,-1.4505,1.8071;-.4963,4.0235,.0332;-1.8669,3.8119,-.0325;-2.403,3.29,-1.2047;-1.6101,3.0045,-2.3139;-.2395,3.2132,-2.2271;-.0528,4.3882,.9632;-2.5176,4.0241,.8163;-3.8385,3.0033,-1.2641;-2.0679,2.6087,-3.2211;.3958,2.9655,-3.0796;2.1783,-5.9186,2.2918;1.7725,-6.4077,.2413;-4.3189,2.7233,-2.3411;-4.4685,3.0437,-.2239;6.623,.1662,-2.0262;5.9477,1.413,-1.884;7.8042,.0972,-2.8155;8.2834,1.207,-3.4662;8.3191,-.8642,-2.9051;9.1895,1.1418,-4.0748;6.4525,2.5364,-2.5972;7.5885,2.4361,-3.364;5.9216,3.4886,-2.5381;7.9551,3.3128,-3.9056;4.5751,3.9017,-.2419;3.756,5.0519,-.0456;5.923,3.9526,.2127;6.4383,5.0948,.777;6.5528,3.0663,.1162;7.4768,5.1079,1.12;4.3219,6.2239,.5283;5.6357,6.2514,.9255;3.6838,7.1033,.66;6.0594,7.1563,1.3699;-2.3577,-3.9416,-2.8635;-2.5399,-4.9753,-2.5323;-3.232,-3.6202,-3.4611;-1.4846,-3.9397,-3.5351;-1.6998,-1.6019,-2.098;-2.4388,-1.1317,-2.7717;-1.5325,-.9353,-1.2373;-.7517,-1.6474,-2.6578;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925760798</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001246031036 0.000156056289 0.018726512442 0.005332266903</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057085326 -0.000108924 0.000047098 0.000331137 0.000385851 0.000424465 0.000487376 0.000523551 0.000656589 0.000768381 0.000861355 0.000993732 0.001159633 0.001210837 0.001363012 0.001411798 0.001538183 0.001805755 0.002230642 0.002372863 0.002536932 0.002631392 0.002854813 0.003515446 0.003636194 0.003862946 0.004363475 0.004715569 0.004825141 0.005049056 0.005244896 0.005362492 0.006335851 0.006383367 0.006733445 0.006999194 0.007220842 0.007589086 0.008178198 0.008685584 0.008898985 0.009477730 0.009792255 0.010466066 0.011164547 0.011330721 0.011820502 0.012530014 0.013342124 0.013687812 0.014007073 0.014630413 0.014988290 0.015471600 0.015834777 0.016610578 0.017115757 0.018572495 0.018891419 0.019442342 0.020355590 0.020649163 0.021496216 0.021880833 0.022441780 0.022775041 0.023443279 0.023868953 0.024515414 0.025871240 0.026581124 0.026921396 0.027274142 0.027604423 0.028204539 0.029105032 0.030889270 0.031520243 0.032983162 0.034073944 0.034652957 0.035959529 0.039044801 0.039501700 0.041963611 0.045399424 0.046163142 0.047017165 0.048794532 0.049690626 0.049865615 0.050798455 0.051536129 0.052172828 0.052287255 0.052406529 0.052748834 0.053542810 0.054920909 0.056061202 0.056412581 0.056708138 0.057005121 0.057310157 0.057767793 0.058587780 0.059227224 0.059706319 0.061263458 0.062038194 0.062850281 0.064227336 0.064556255 0.065001360 0.066006714 0.067471327 0.067952619 0.068935003 0.070526381 0.072138010 0.072624665 0.072901307 0.073449500 0.075695608 0.078566519 0.080838600 0.081630443 0.083348460 0.084667421 0.088501382 0.089014429 0.089376122 0.089856217 0.091305761 0.093312231 0.094579501 0.095485045 0.096189984 0.096853231 0.098416604 0.100153802 0.100698061 0.102633149 0.103731356 0.104178041 0.106417608 0.108801068 0.110856381 0.112212275 0.112818767 0.113793429 0.114725470 0.116926447 0.117165893 0.118602262 0.119277496 0.120579207 0.122188809 0.125193819 0.125727381 0.128493975 0.128985882 0.130962860 0.133597817 0.136338573 0.137732899 0.138645887 0.139622982 0.140522016 0.143474569 0.144648750 0.145904247 0.146770316 0.151979451 0.153630172 0.154324567 0.160872563 0.161523318 0.168505637 0.171443240 0.175954343 0.179078926 0.181596424 0.184315749 0.189060222 0.189828010 0.191876308 0.201271023 0.202208651 0.206284738 0.206949422 0.207257711 0.212290838 0.212573133 0.215375935 0.217072449 0.220332857 0.221023112 0.223379655 0.224565406 0.225654758 0.231850266 0.234539394 0.235446480 0.238499274 0.246459951 0.249322377 0.251845935 0.256531849 0.257205311 0.258262829 0.262520560 0.271573750 0.282869030 0.292012541 0.299958164 0.300093981 0.301003102 0.307096743 0.307781714 0.309838819 0.319856748 0.321345562 0.326404751 0.330100958 0.336440070 0.347744259 0.352022411 0.355631936 0.360560170 0.361612165 0.364112730 0.384498065 0.406930229 0.414413812 0.430264187 0.432622177 0.435347077 0.450802147 0.464635589 0.475709986 0.478819536 0.480336455 0.486713711 0.498897833 0.503878999 0.514996322 0.517614528 0.543779938 0.566926456 0.567682064 0.586542734 0.592187415 0.605718126 0.644163837 0.645389905 0.667971039 0.675665260 0.687375248 0.703607202 0.704351165 0.705894533 0.709455357 0.717175531 0.734002080 0.738000398 0.739699798 0.747956482 0.750783119 0.771610810 0.775981565 0.808859560 0.821796273 0.824041182 0.828935356 0.834208263 0.847142191 0.849420452 0.851419477 0.854513049 0.863292711 0.867470707 0.875818063 0.887455722 0.891060187 0.892399056 0.893466661 0.902003231 0.910359446 0.918194166 0.924196018 0.924725336 0.931935960 0.935588486 0.956058240 0.963716460 0.965197859 0.970112749 0.978132291 0.982522126 0.998630671 1.012976799 1.015796271 1.021639751 1.040142111 1.055072759 1.070622925 1.072443092 1.079451821 1.087358710 1.107935515 1.110386260 1.115395113 1.118826805 1.122590971 1.123786226 1.141863789 1.148847443 1.161749393 1.170165400 1.177186148 1.187250411 1.200756010 1.221771695 1.233591181 1.258130089 1.296454373 1.298245800 1.314720520 1.326483435 1.327470711 1.330202242 1.331377127 1.334772359 1.342118614 1.348770427 1.365419622 1.379993179 1.381305261 1.381819136 1.429215823 1.517235100 1.557986110 1.684733220 1.923166590</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">225</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91499081" y3="-0.95529706" z3="-0.68711775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59806709" y3="-1.95129544" z3="-1.55420777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0810326" y3="-0.99675116" z3="-1.41597654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77343525" y3="1.47727561" z3="-1.06741205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28438355" y3="0.31061392" z3="-0.5051124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65548661" y3="2.73961197" z3="-1.15610664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00453298" y3="2.73569216" z3="-0.84880188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37947655" y3="4.99481196" z3="-0.37409806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8088352" y3="3.85440534" z3="-0.88860681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75370362" y3="5.87055012" z3="-0.17530226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09001573" y3="1.61500718" z3="-1.68356839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12374365" y3="0.35763847" z3="0.21184152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71046145" y3="0.3865577" z3="-0.64667212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60602851" y3="0.73723965" z3="0.28095992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65931903" y3="-0.85335191" z3="-1.51132371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09290046" y3="-2.47105432" z3="-1.32498467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01849675" y3="-5.4994687" z3="-6.27105151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75259948" y3="-5.0626074" z3="-5.30418069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0545718" y3="-3.916066" z3="-2.84956176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7169058" y3="-3.68161915" z3="-5.16098361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4683571" y3="-5.88679748" z3="-4.21232397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13363285" y3="-5.30738715" z3="-2.99483631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3771935" y3="-3.07660895" z3="-3.94032496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94568636" y3="-3.0162467" z3="-5.99723329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52092964" y3="-6.97480569" z3="-4.30280565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94942797" y3="-5.93835798" z3="-2.12103868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6522527" y3="-3.3652763" z3="-1.60586699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34506172" y3="-3.84847544" z3="-0.8570289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68715515" y3="-4.85185585" z3="-1.12340854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37784558" y3="-3.54370383" z3="0.59080371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40192996" y3="-3.06347692" z3="3.34832465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.679379" y3="-4.57743793" z3="1.48564724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10873162" y3="-2.26487929" z3="1.08795695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11756519" y3="-2.02700684" z3="2.45788888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68279883" y3="-4.33945411" z3="2.85879493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86975186" y3="-5.58617066" z3="1.10827809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09487678" y3="-1.4256013" z3="0.42189567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10750014" y3="-1.01802712" z3="2.81374616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88348826" y3="-5.1630957" z3="3.549201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39773741" y3="-2.88062604" z3="4.42675607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3280756" y3="-1.74069331" z3="-3.91397854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46256466" y3="-1.33256354" z3="-3.01285733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33852862" y3="3.71469361" z3="-1.04724734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13467155" y3="-2.98712794" z3="-1.70820268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91878359" y3="-3.16222744" z3="-0.56404928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11075817" y3="-2.28519401" z3="0.36617785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83850265" y3="-0.71885824" z3="0.61905235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70518082" y3="-0.25151379" z3="-0.96569712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52954637" y3="0.45701216" z3="1.2047146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07790633" y3="-1.05738418" z3="1.98009208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39980665" y3="-4.37363768" z3="-0.32429812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1130687" y3="-4.61148651" z3="0.87938881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00860797" y3="0.04901996" z3="-1.76427183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37093263" y3="0.61032649" z3="-0.77694263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3263737" y3="-1.08356488" z3="-1.34427442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64301037" y3="0.56165682" z3="0.55293395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16312302" y3="0.15045873" z3="2.1998343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99896626" y3="1.45327681" z3="1.30739866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53863522" y3="-0.10941076" z3="2.31253881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89150534" y3="-1.72499975" z3="1.64523572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5858958" y3="-1.51898141" z3="2.85466718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05164379" y3="-4.03273748" z3="0.89601984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50039138" y3="-4.35224356" z3="1.75668246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34001304" y3="-5.68618582" z3="0.87766558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27677548" y3="-2.19724071" z3="-0.178012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13471965" y3="-3.29572078" z3="-1.03831264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49303784" y3="-4.45546394" z3="-0.6203489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99818566" y3="-4.51152996" z3="0.6770899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14557722" y3="-3.45176894" z3="1.56731746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77813405" y3="-2.29461511" z3="1.13083273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49025344" y3="-3.22460557" z3="-2.06950884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35251588" y3="-5.29713278" z3="-1.29947837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26366438" y3="-5.70129733" z3="1.10936478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74020668" y3="-3.53301805" z3="2.57693037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8710174" y3="-1.44601014" z3="1.8102258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49091248" y3="4.02030363" z3="0.04069108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8619346" y3="3.80880672" z3="-0.02325275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40081245" y3="3.28871878" z3="-1.1948888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61041236" y3="3.00553424" z3="-2.30570481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24027254" y3="3.21725168" z3="-2.22405324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0453528" y3="4.38372746" z3="0.96972751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51017375" y3="4.01831304" z3="0.82833373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83647816" y3="3.00180994" z3="-1.25111328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07058276" y3="2.61128627" z3="-3.2125801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39297927" y3="2.97174914" z3="-3.07777733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17227142" y3="-5.91263503" z3="2.2977434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77000878" y3="-6.40502559" z3="0.24707316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31944432" y3="2.7236289" z3="-2.32754033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46420568" y3="3.04100229" z3="-0.2093502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62259359" y3="0.16391789" z3="-2.02647166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9479888" y3="1.41142" z3="-1.88592429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80293101" y3="0.09268985" z3="-2.81696302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28160352" y3="1.20079209" z3="-3.47079083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31736058" y3="-0.86924918" z3="-2.90520789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18693222" y3="1.13370641" z3="-4.08056331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45234218" y3="2.53308098" z3="-2.60209079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58723641" y3="2.43054317" z3="-3.37032046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92198666" y3="3.48586283" z3="-2.54393952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95345549" y3="3.30580486" z3="-3.91429988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57856318" y3="3.90441306" z3="-0.2480198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76030357" y3="5.05555339" z3="-0.05262762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92745491" y3="3.95596518" z3="0.20355134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44440662" y3="5.09954784" z3="0.76357422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55678711" y3="3.0689859" z3="0.10761639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48362229" y3="5.11305684" z3="1.10409416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32799044" y3="6.22898405" z3="0.51663486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64267773" y3="6.25703223" z3="0.91057977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69077421" y3="7.10910377" z3="0.6466308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06782833" y3="7.16314982" z3="1.35115834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35294528" y3="-3.93793121" z3="-2.86859802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53524837" y3="-4.97259993" z3="-2.53978504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22526601" y3="-3.61517575" z3="-3.46754709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47818461" y3="-3.93458489" z3="-3.53822818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69764109" y3="-1.60041793" z3="-2.09528041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43498513" y3="-1.12769408" z3="-2.7693036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53265946" y3="-0.93687734" z3="-1.23196142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74925579" y3="-1.64471744" z3="-2.65410644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.915,-.9553,-.6871;6.5981,-1.9513,-1.5542;6.081,-.9968,-1.416;4.7734,1.4773,-1.0674;4.2844,.3106,-.5051;2.6555,2.7396,-1.1561;4.0045,2.7357,-.8488;2.3795,4.9948,-.3741;1.8088,3.8544,-.8886;1.7537,5.8706,-.1753;2.09,1.615,-1.6836;3.1237,.3576,.2118;1.7105,.3866,-.6467;.606,.7372,.281;1.6593,-.8534,-1.5113;1.0929,-2.4711,-1.325;2.0185,-5.4995,-6.2711;1.7526,-5.0626,-5.3042;1.0546,-3.9161,-2.8496;1.7169,-3.6816,-5.161;1.4684,-5.8868,-4.2123;1.1336,-5.3074,-2.9948;1.3772,-3.0766,-3.9403;1.9457,-3.0162,-5.9972;1.5209,-6.9748,-4.3028;.9494,-5.9384,-2.121;.6523,-3.3653,-1.6059;-.3451,-3.8485,-.857;-.6872,-4.8519,-1.1234;-.3778,-3.5437,.5908;-.4019,-3.0635,3.3483;-.6794,-4.5774,1.4856;-.1087,-2.2649,1.088;-.1176,-2.027,2.4579;-.6828,-4.3395,2.8588;-.8698,-5.5862,1.1083;.0949,-1.4256,.4219;.1075,-1.018,2.8137;-.8835,-5.1631,3.5492;-.3977,-2.8806,4.4268;1.3281,-1.7407,-3.914;1.4626,-1.3326,-3.0129;.3385,3.7147,-1.0472;-2.1347,-2.9871,-1.7082;-2.9188,-3.1622,-.564;-3.1108,-2.2852,.3662;-3.8385,-.7189,.6191;-4.7052,-.2515,-.9657;-2.5295,.457,1.2047;-5.0779,-1.0574,1.9801;-3.3998,-4.3736,-.3243;-4.1131,-4.6115,.8794;-4.0086,.049,-1.7643;-5.3709,.6103,-.7769;-5.3264,-1.0836,-1.3443;-1.643,.5617,.5529;-2.1631,.1505,2.1998;-2.999,1.4533,1.3074;-5.5386,-.1094,2.3125;-5.8915,-1.725,1.6452;-4.5859,-1.519,2.8547;-5.0516,-4.0327,.896;-3.5004,-4.3522,1.7567;-4.34,-5.6862,.8777;4.2768,-2.1972,-.178;4.1347,-3.2957,-1.0383;3.493,-4.4555,-.6203;2.9982,-4.5115,.6771;3.1456,-3.4518,1.5673;3.7781,-2.2946,1.1308;4.4903,-3.2246,-2.0695;3.3525,-5.2971,-1.2995;2.2637,-5.7013,1.1094;2.7402,-3.533,2.5769;3.871,-1.446,1.8102;-.4909,4.0203,.0407;-1.8619,3.8088,-.0233;-2.4008,3.2887,-1.1949;-1.6104,3.0055,-2.3057;-.2403,3.2173,-2.2241;-.0454,4.3837,.9697;-2.5102,4.0183,.8283;-3.8365,3.0018,-1.2511;-2.0706,2.6113,-3.2126;.393,2.9717,-3.0778;2.1723,-5.9126,2.2977;1.77,-6.405,.2471;-4.3194,2.7236,-2.3275;-4.4642,3.041,-.2094;6.6226,.1639,-2.0265;5.948,1.4114,-1.8859;7.8029,.0927,-2.817;8.2816,1.2008,-3.4708;8.3174,-.8692,-2.9052;9.1869,1.1337,-4.0806;6.4523,2.5331,-2.6021;7.5872,2.4305,-3.3703;5.922,3.4859,-2.5439;7.9535,3.3058,-3.9143;4.5786,3.9044,-.248;3.7603,5.0556,-.0526;5.9275,3.956,.2036;6.4444,5.0995,.7636;6.5568,3.069,.1076;7.4836,5.1131,1.1041;4.328,6.229,.5166;5.6427,6.257,.9106;3.6908,7.1091,.6466;6.0678,7.1631,1.3512;-2.3529,-3.9379,-2.8686;-2.5352,-4.9726,-2.5398;-3.2253,-3.6152,-3.4675;-1.4782,-3.9346,-3.5382;-1.6976,-1.6004,-2.0953;-2.435,-1.1277,-2.7693;-1.5327,-.9369,-1.232;-.7493,-1.6447,-2.6541;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928154698</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000940398387 0.000149971643 0.022241285951 0.005350968838</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057089099 -0.000117258 -0.000025134 0.000333662 0.000383767 0.000425258 0.000489300 0.000525986 0.000656374 0.000794983 0.000862505 0.000998122 0.001162142 0.001208673 0.001368046 0.001412716 0.001547187 0.001807412 0.002230558 0.002369553 0.002559706 0.002638695 0.002858298 0.003513978 0.003637301 0.003864923 0.004365248 0.004725904 0.004836277 0.005049047 0.005252194 0.005365496 0.006339359 0.006407158 0.006732951 0.006995741 0.007223702 0.007587785 0.008176626 0.008694038 0.008899353 0.009494129 0.009794617 0.010487339 0.011163799 0.011319935 0.011827686 0.012531052 0.013345503 0.013689192 0.014008989 0.014630737 0.014989010 0.015471490 0.015837356 0.016610625 0.017112737 0.018570473 0.018891407 0.019442841 0.020355554 0.020638271 0.021505583 0.021880553 0.022444351 0.022776201 0.023443347 0.023871098 0.024515879 0.025871088 0.026581842 0.026920857 0.027272528 0.027608728 0.028202967 0.029100682 0.030889838 0.031520455 0.032949393 0.034074500 0.034654414 0.035959490 0.039044905 0.039509323 0.041965525 0.045400759 0.046163963 0.046993155 0.048797041 0.049690669 0.049866279 0.050796298 0.051536139 0.052173247 0.052287258 0.052406532 0.052750196 0.053544105 0.054921132 0.056061139 0.056413172 0.056708221 0.057005512 0.057323035 0.057769336 0.058587985 0.059228451 0.059706927 0.061263461 0.062040684 0.062857772 0.064227446 0.064557053 0.065001542 0.066007076 0.067471165 0.067953212 0.068933256 0.070525883 0.072137524 0.072625671 0.072902534 0.073453823 0.075650566 0.078565856 0.080837672 0.081635071 0.083348672 0.084657912 0.088452174 0.089032311 0.089376378 0.089850847 0.091304749 0.093312248 0.094580287 0.095485501 0.096190085 0.096853312 0.098419330 0.100154187 0.100697683 0.102646163 0.103727207 0.104178569 0.106419483 0.108800669 0.110858179 0.112213233 0.112816926 0.113793131 0.114725898 0.116927536 0.117166288 0.118601896 0.119283511 0.120579144 0.122192913 0.125192501 0.125729466 0.128493980 0.128988096 0.130962986 0.133605122 0.136338753 0.137730579 0.138646309 0.139627117 0.140520805 0.143476967 0.144649235 0.145904975 0.146772195 0.151982849 0.153629573 0.154321860 0.160870210 0.161568330 0.168506226 0.171443754 0.175963038 0.179077903 0.181599439 0.184318294 0.189065188 0.189831100 0.191875318 0.201273695 0.202210550 0.206285631 0.206949406 0.207257768 0.212292567 0.212573346 0.215382428 0.217074425 0.220334863 0.221024766 0.223448141 0.224567846 0.225662179 0.231850855 0.234539930 0.235456555 0.238501085 0.246462033 0.249331257 0.251852332 0.256534095 0.257205283 0.258263134 0.262521131 0.271573702 0.282870654 0.292013272 0.299960491 0.300095223 0.301003734 0.307099853 0.307781600 0.309838962 0.319862352 0.321346164 0.326407049 0.330109144 0.336443395 0.347746900 0.352022334 0.355632272 0.360560417 0.361613007 0.364112800 0.384497738 0.406929635 0.414422327 0.430265473 0.432607699 0.435339298 0.450802773 0.464638076 0.475702825 0.478819922 0.480338189 0.486707988 0.498897800 0.503880401 0.515003139 0.517625533 0.543780135 0.566926700 0.567682098 0.586542732 0.592188165 0.605717824 0.644170694 0.645393381 0.667973180 0.675666644 0.687375191 0.703641055 0.704355251 0.705914852 0.709476889 0.717175730 0.734002214 0.738000998 0.739704301 0.747957665 0.750783455 0.771610773 0.775981574 0.808887044 0.821796408 0.824045859 0.828935743 0.834208675 0.847142426 0.849421469 0.851421330 0.854518624 0.863293869 0.867470743 0.875819219 0.887455753 0.891060621 0.892399853 0.893510218 0.902005204 0.910353637 0.918186916 0.924184197 0.924716228 0.931936570 0.935588927 0.956056634 0.963682246 0.965199220 0.970112741 0.978130416 0.982523699 0.998631537 1.012997978 1.015798156 1.021645211 1.040144213 1.055073230 1.070637641 1.072444258 1.079459309 1.087358987 1.107949046 1.110387434 1.115437107 1.118826945 1.122591550 1.123787296 1.141863694 1.148851136 1.161749399 1.170165496 1.177187188 1.187250721 1.200756227 1.221772048 1.233614325 1.258132907 1.296457551 1.298246570 1.314721401 1.326483468 1.327471112 1.330206562 1.331377442 1.334775476 1.342119703 1.348768715 1.365418046 1.379994874 1.381310291 1.381818288 1.429219431 1.517245127 1.557986360 1.684733922 1.923154825</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">226</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91518135" y3="-0.95500021" z3="-0.68277602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5972165" y3="-1.95255823" z3="-1.54996589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08046084" y3="-0.99775254" z3="-1.41276148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77356237" y3="1.47698106" z3="-1.06713095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28530568" y3="0.31144805" z3="-0.50174559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65537994" y3="2.73990577" z3="-1.1534254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00536813" y3="2.73609671" z3="-0.84947176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38236689" y3="4.99771054" z3="-0.37898206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8100633" y3="3.8559366" z3="-0.88798445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75751119" y3="5.87430428" z3="-0.18233903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08750438" y3="1.61467153" z3="-1.67668986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1262748" y3="0.36014982" z3="0.21778065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71100197" y3="0.38721853" z3="-0.63744073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60817751" y3="0.73724598" z3="0.29241588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65885309" y3="-0.85333113" z3="-1.50123327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09320804" y3="-2.47071972" z3="-1.32155527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03099027" y3="-5.48919217" z3="-6.270529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7622742" y3="-5.05451038" z3="-5.30354073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05786762" y3="-3.91337271" z3="-2.84829018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72842152" y3="-3.67422709" z3="-5.15664885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47243671" y3="-5.88074871" z3="-4.21514381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13476014" y3="-5.30409815" z3="-2.99724077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38504525" y3="-3.0718617" z3="-3.93582401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96138196" y3="-3.00720701" z3="-5.99008529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5229718" y3="-6.96828271" z3="-4.3086251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94626221" y3="-5.93706048" z3="-2.12614932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65341674" y3="-3.36474705" z3="-1.60450455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34565491" y3="-3.84854746" z3="-0.85802469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68673368" y3="-4.85239067" z3="-1.12493516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38127035" y3="-3.54410688" z3="0.59008503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41253254" y3="-3.06445726" z3="3.34799955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68577307" y3="-4.57826331" z3="1.48413152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11185641" y3="-2.2657748" z3="1.08842603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1241291" y3="-2.02823603" z3="2.45856767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69281973" y3="-4.34054449" z3="2.85743829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87487305" y3="-5.58779827" z3="1.10643442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09503154" y3="-1.42660723" z3="0.42328446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10102465" y3="-1.01937999" z3="2.815272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89649083" y3="-5.16419493" z3="3.54673234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41140572" y3="-2.88156552" z3="4.42654167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33698117" y3="-1.73619583" z3="-3.90659971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46827686" y3="-1.32991984" z3="-3.00415523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33955822" y3="3.71542587" z3="-1.0437052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13324416" y3="-2.98728285" z3="-1.71185488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92021256" y3="-3.16516546" z3="-0.56975947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11355524" y3="-2.28999122" z3="0.36201385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84001794" y3="-0.7247848" z3="0.6203683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70769377" y3="-0.2540763" z3="-0.96291086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53146494" y3="0.45063752" z3="1.20730021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07721553" y3="-1.06730251" z3="1.98165407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40284915" y3="-4.37656467" z3="-0.33418471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11954261" y3="-4.61579818" z3="0.86817951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01218533" y3="0.04888395" z3="-1.76126189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37280991" y3="0.60745926" z3="-0.77138813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3298694" y3="-1.08465948" z3="-1.34288979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64464165" y3="0.55659793" z3="0.55564449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16491485" y3="0.14225654" z3="2.20216161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00050693" y3="1.44610934" z3="1.31268508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53785196" y3="-0.12081322" z3="2.31777853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89056743" y3="-1.73452667" z3="1.64651095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58387372" y3="-1.5307574" z3="2.85452128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05540719" y3="-4.03456262" z3="0.8850419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50830626" y3="-4.36017286" z3="1.74748905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34970942" y3="-5.68921762" z3="0.86304439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2766885" y3="-2.19641006" z3="-0.17255877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13463633" y3="-3.29520998" z3="-1.03230006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4917588" y3="-4.45418161" z3="-0.61426459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99567355" y3="-4.50933241" z3="0.6827214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14338273" y3="-3.44954174" z3="1.57254962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77713299" y3="-2.29299188" z3="1.13597828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49095923" y3="-3.22489717" z3="-2.06326516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35079101" y3="-5.29557985" z3="-1.29313317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25926883" y3="-5.69797789" z3="1.11445707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73699815" y3="-3.52987105" z3="2.58182734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87015879" y3="-1.44432897" z3="1.81504844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48790558" y3="4.01855636" z3="0.04532816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85843497" y3="3.80435212" z3="-0.01461052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39929987" y3="3.28699433" z3="-1.18674536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61143251" y3="3.00855314" z3="-2.30120537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24089537" y3="3.22007751" z3="-2.22024538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04020772" y3="4.3798179" z3="0.97458838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50511773" y3="4.01091303" z3="0.83862542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83470271" y3="2.99886511" z3="-1.24118574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07302686" y3="2.6163473" z3="-3.20810428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39027927" y3="2.97879693" z3="-3.07761978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16620219" y3="-5.90898301" z3="2.30264135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76550223" y3="-6.40088114" z3="0.25161664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31890169" y3="2.72100104" z3="-2.31719556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46109084" y3="3.03697399" z3="-0.19861674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62141194" y3="0.16172544" z3="-2.02600572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94679819" y3="1.40934486" z3="-1.88757905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80101469" y3="0.08891617" z3="-2.81730017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27892846" y3="1.19556816" z3="-3.47413429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31547241" y3="-0.87307073" z3="-2.90360321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1837835" y3="1.12736263" z3="-4.08431309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45002943" y3="2.5291753" z3="-2.60742409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58422015" y3="2.42513859" z3="-3.37635548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91940455" y3="3.48172769" z3="-2.5517272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94962296" y3="3.29907874" z3="-3.92300814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58125485" y3="3.90653313" z3="-0.25376804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76411949" y3="5.05876431" z3="-0.06083229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93120165" y3="3.95901659" z3="0.19471963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45036002" y3="5.10447044" z3="0.74873649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5595441" y3="3.07135993" z3="0.10158834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4904289" y3="5.11871462" z3="1.08672672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33387253" y3="6.23393776" z3="0.50267033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64970718" y3="6.26288491" z3="0.89300054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69725686" y3="7.1148485" z3="0.63156398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07647534" y3="7.17047764" z3="1.32891706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3488783" y3="-3.9347383" z3="-2.87513783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52787023" y3="-4.97118161" z3="-2.55062289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22286838" y3="-3.61324239" z3="-3.47315182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47389735" y3="-3.92535471" z3="-3.54421593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69831387" y3="-1.59807694" z3="-2.0944565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43610925" y3="-1.12452367" z3="-2.7672488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53430851" y3="-0.93658261" z3="-1.22926667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74857224" y3="-1.63938088" z3="-2.65189242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9152,-.955,-.6828;6.5972,-1.9526,-1.55;6.0805,-.9978,-1.4128;4.7736,1.477,-1.0671;4.2853,.3114,-.5017;2.6554,2.7399,-1.1534;4.0054,2.7361,-.8495;2.3824,4.9977,-.379;1.8101,3.8559,-.888;1.7575,5.8743,-.1823;2.0875,1.6147,-1.6767;3.1263,.3601,.2178;1.711,.3872,-.6374;.6082,.7372,.2924;1.6589,-.8533,-1.5012;1.0932,-2.4707,-1.3216;2.031,-5.4892,-6.2705;1.7623,-5.0545,-5.3035;1.0579,-3.9134,-2.8483;1.7284,-3.6742,-5.1566;1.4724,-5.8807,-4.2151;1.1348,-5.3041,-2.9972;1.385,-3.0719,-3.9358;1.9614,-3.0072,-5.9901;1.523,-6.9683,-4.3086;.9463,-5.9371,-2.1261;.6534,-3.3647,-1.6045;-.3457,-3.8485,-.858;-.6867,-4.8524,-1.1249;-.3813,-3.5441,.5901;-.4125,-3.0645,3.348;-.6858,-4.5783,1.4841;-.1119,-2.2658,1.0884;-.1241,-2.0282,2.4586;-.6928,-4.3405,2.8574;-.8749,-5.5878,1.1064;.095,-1.4266,.4233;.101,-1.0194,2.8153;-.8965,-5.1642,3.5467;-.4114,-2.8816,4.4265;1.337,-1.7362,-3.9066;1.4683,-1.3299,-3.0042;.3396,3.7154,-1.0437;-2.1332,-2.9873,-1.7119;-2.9202,-3.1652,-.5698;-3.1136,-2.29,.362;-3.84,-.7248,.6204;-4.7077,-.2541,-.9629;-2.5315,.4506,1.2073;-5.0772,-1.0673,1.9817;-3.4028,-4.3766,-.3342;-4.1195,-4.6158,.8682;-4.0122,.0489,-1.7613;-5.3728,.6075,-.7714;-5.3299,-1.0847,-1.3429;-1.6446,.5566,.5556;-2.1649,.1423,2.2022;-3.0005,1.4461,1.3127;-5.5379,-.1208,2.3178;-5.8906,-1.7345,1.6465;-4.5839,-1.5308,2.8545;-5.0554,-4.0346,.885;-3.5083,-4.3602,1.7475;-4.3497,-5.6892,.863;4.2767,-2.1964,-.1726;4.1346,-3.2952,-1.0323;3.4918,-4.4542,-.6143;2.9957,-4.5093,.6827;3.1434,-3.4495,1.5725;3.7771,-2.293,1.136;4.491,-3.2249,-2.0633;3.3508,-5.2956,-1.2931;2.2593,-5.698,1.1145;2.737,-3.5299,2.5818;3.8702,-1.4443,1.815;-.4879,4.0186,.0453;-1.8584,3.8044,-.0146;-2.3993,3.287,-1.1867;-1.6114,3.0086,-2.3012;-.2409,3.2201,-2.2202;-.0402,4.3798,.9746;-2.5051,4.0109,.8386;-3.8347,2.9989,-1.2412;-2.073,2.6163,-3.2081;.3903,2.9788,-3.0776;2.1662,-5.909,2.3026;1.7655,-6.4009,.2516;-4.3189,2.721,-2.3172;-4.4611,3.037,-.1986;6.6214,.1617,-2.026;5.9468,1.4093,-1.8876;7.801,.0889,-2.8173;8.2789,1.1956,-3.4741;8.3155,-.8731,-2.9036;9.1838,1.1274,-4.0843;6.45,2.5292,-2.6074;7.5842,2.4251,-3.3764;5.9194,3.4817,-2.5517;7.9496,3.2991,-3.923;4.5813,3.9065,-.2538;3.7641,5.0588,-.0608;5.9312,3.959,.1947;6.4504,5.1045,.7487;6.5595,3.0714,.1016;7.4904,5.1187,1.0867;4.3339,6.2339,.5027;5.6497,6.2629,.893;3.6973,7.1148,.6316;6.0765,7.1705,1.3289;-2.3489,-3.9347,-2.8751;-2.5279,-4.9712,-2.5506;-3.2229,-3.6132,-3.4732;-1.4739,-3.9254,-3.5442;-1.6983,-1.5981,-2.0945;-2.4361,-1.1245,-2.7672;-1.5343,-.9366,-1.2293;-.7486,-1.6394,-2.6519;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662927642690</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001101967155 0.000168789604 0.022610225356 0.005357291277</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057089385 -0.000519767 -0.000005459 0.000301967 0.000378462 0.000428381 0.000496786 0.000522041 0.000653042 0.000785969 0.000848200 0.001001815 0.001164300 0.001211776 0.001372407 0.001416059 0.001551756 0.001768050 0.002211689 0.002356223 0.002559264 0.002670561 0.002862230 0.003508216 0.003641356 0.003863064 0.004369144 0.004704136 0.004861623 0.005050014 0.005253448 0.005362049 0.006331167 0.006375145 0.006713267 0.006980525 0.007227361 0.007587307 0.008166801 0.008706144 0.008891121 0.009510649 0.009802234 0.010397226 0.011140467 0.011170324 0.011834595 0.012533572 0.013333522 0.013689960 0.014015910 0.014624299 0.014990227 0.015471642 0.015827756 0.016610910 0.017094197 0.018565402 0.018892504 0.019438410 0.020355382 0.020608422 0.021488845 0.021878944 0.022444547 0.022779656 0.023444644 0.023869116 0.024516415 0.025870464 0.026579356 0.026919174 0.027254589 0.027601501 0.028199932 0.029093763 0.030889520 0.031520303 0.032462935 0.034071858 0.034657428 0.035960703 0.039045574 0.039520778 0.041969372 0.045395708 0.046140210 0.046904952 0.048802976 0.049690190 0.049863093 0.050801300 0.051536201 0.052174336 0.052287254 0.052406572 0.052754207 0.053546351 0.054917578 0.056060962 0.056415310 0.056707589 0.057005986 0.057297981 0.057763200 0.058586832 0.059230369 0.059708778 0.061269410 0.062044712 0.062866249 0.064224899 0.064557373 0.065006304 0.066008432 0.067469276 0.067955230 0.068932237 0.070519869 0.072137297 0.072628145 0.072900522 0.073441980 0.075506107 0.078552234 0.080835470 0.081627921 0.083348048 0.084592117 0.088095401 0.088942868 0.089378560 0.089827851 0.091303122 0.093312416 0.094581337 0.095486646 0.096190157 0.096853261 0.098424963 0.100150503 0.100696648 0.102660102 0.103708745 0.104179196 0.106421248 0.108791949 0.110862144 0.112216538 0.112805765 0.113792235 0.114709587 0.116928492 0.117169415 0.118601478 0.119285610 0.120578701 0.122202878 0.125175117 0.125736311 0.128494290 0.128983141 0.130964006 0.133634182 0.136339783 0.137717816 0.138646993 0.139631822 0.140516909 0.143479461 0.144648260 0.145905558 0.146772459 0.151985646 0.153629806 0.154305736 0.160816078 0.161329713 0.168509061 0.171443794 0.175968039 0.179072188 0.181600659 0.184319652 0.189070863 0.189840884 0.191868213 0.201275455 0.202216841 0.206286310 0.206948525 0.207257677 0.212297209 0.212574169 0.215400009 0.217064055 0.220341225 0.221024790 0.223614440 0.224570605 0.225683501 0.231852095 0.234540693 0.235475796 0.238502604 0.246453648 0.249249817 0.251856140 0.256533792 0.257205033 0.258263061 0.262524909 0.271573607 0.282867918 0.292013936 0.299962673 0.300095708 0.301003670 0.307100231 0.307781602 0.309835951 0.319866276 0.321346869 0.326408925 0.330112337 0.336440346 0.347747717 0.352022208 0.355632912 0.360558808 0.361613743 0.364112286 0.384498573 0.406932184 0.414392673 0.430258933 0.432253880 0.435273195 0.450805419 0.464638074 0.475631124 0.478818957 0.480340230 0.486664851 0.498897364 0.503866573 0.515011259 0.517624701 0.543779313 0.566925799 0.567681259 0.586542726 0.592167069 0.605715624 0.644176366 0.645392101 0.667974614 0.675663391 0.687373608 0.703649817 0.704356656 0.705910916 0.709481497 0.717176305 0.733989858 0.738000840 0.739699223 0.747658888 0.750783573 0.771610616 0.775981540 0.808887954 0.821796133 0.824047557 0.828935618 0.834209194 0.847142148 0.849421186 0.851417261 0.854520197 0.863294152 0.867470743 0.875821686 0.887455772 0.891058938 0.892380512 0.893521529 0.902009509 0.910311007 0.918108148 0.924035212 0.924640032 0.931938627 0.935585652 0.956024464 0.963317601 0.965195866 0.970111804 0.978086309 0.982528963 0.998632131 1.012979046 1.015805930 1.021654530 1.040145821 1.055073410 1.070651473 1.072444182 1.079459960 1.087359322 1.107975485 1.110389335 1.115511173 1.118827996 1.122592768 1.123790956 1.141862534 1.148852474 1.161749416 1.170165488 1.177189823 1.187251686 1.200756304 1.221772640 1.233635584 1.258133372 1.296457502 1.298245533 1.314721385 1.326483300 1.327469748 1.330206745 1.331377314 1.334777075 1.342121167 1.348767100 1.365404361 1.379991661 1.381308157 1.381816555 1.429215433 1.517170505 1.557986406 1.684732826 1.922901308</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">227</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91365925" y3="-0.95491874" z3="-0.68295999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59454828" y3="-1.9533712" z3="-1.55134309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07790982" y3="-0.99844652" z3="-1.41454355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77168887" y3="1.47674842" z3="-1.06963384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28411432" y3="0.311755" z3="-0.50242529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65402806" y3="2.74075965" z3="-1.15180599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00465868" y3="2.73635433" z3="-0.85106751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38341937" y3="4.99805787" z3="-0.37443742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80964846" y3="3.85684521" z3="-0.88331169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75899317" y3="5.8745436" z3="-0.17418266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08461762" y3="1.61590642" z3="-1.67428993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1261404" y3="0.36119581" z3="0.21863302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70965114" y3="0.3883863" z3="-0.63459803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6083138" y3="0.73827668" z3="0.29702118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65596736" y3="-0.85198206" z3="-1.49860696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.093273" y3="-2.47015645" z3="-1.31905628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04013318" y3="-5.48863808" z3="-6.26652487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77012607" y3="-5.05397374" z3="-5.29984871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06172686" y3="-3.91287567" z3="-2.84570556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73402606" y3="-3.67328608" z3="-5.15378467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48101461" y3="-5.88060756" z3="-4.21103825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14125808" y3="-5.30391122" z3="-2.99369793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38909458" y3="-3.07100793" z3="-3.93328297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96658651" y3="-3.00603277" z3="-5.98755935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53373817" y3="-6.96844422" z3="-4.30370629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95325682" y3="-5.93684019" z3="-2.12201921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65483937" y3="-3.36470629" z3="-1.60250374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34448618" y3="-3.84972665" z3="-0.85724742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68435847" y3="-4.85363741" z3="-1.12480233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38178071" y3="-3.54524068" z3="0.59071671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41521873" y3="-3.06438808" z3="3.34851302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68846118" y3="-4.57820195" z3="1.48477565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11220619" y3="-2.26680218" z3="1.08874915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12559258" y3="-2.02856664" z3="2.45879138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69673406" y3="-4.33979369" z3="2.85801643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87933875" y3="-5.58633126" z3="1.10669803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09594966" y3="-1.42829346" z3="0.42327614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10002444" y3="-1.01985857" z3="2.81511341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90147261" y3="-5.16288077" z3="3.54808615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41497815" y3="-2.88121272" z3="4.42703903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34013358" y3="-1.7351759" z3="-3.90440694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46925743" y3="-1.3286488" z3="-3.00179955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3384512" y3="3.71776573" z3="-1.03593211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13176399" y3="-2.99007623" z3="-1.71357732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9197114" y3="-3.1670784" z3="-0.57211199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11453682" y3="-2.29156937" z3="0.35873022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84096633" y3="-0.72500428" z3="0.61375934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69833271" y3="-0.25033554" z3="-0.97353244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53301259" y3="0.44601255" z3="1.21079731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08824942" y3="-1.0671685" z3="1.96611352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40145556" y3="-4.37892362" z3="-0.33546692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11967587" y3="-4.61784488" z3="0.86525526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.9978909" y3="0.0595106" z3="-1.76453957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36981393" y3="0.60637699" z3="-0.78294294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31195991" y3="-1.08262239" z3="-1.36254124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64330661" y3="0.55100756" z3="0.56377759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17272518" y3="0.13484544" z3="2.20674482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00101269" y3="1.44268162" z3="1.31484972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5506054" y3="-0.12010751" z3="2.29903118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89978672" y3="-1.73335161" z3="1.62390072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60192309" y3="-1.53158255" z3="2.84201225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05847009" y3="-4.03935083" z3="0.87836867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.510817" y3="-4.35918433" z3="1.74540504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34631094" y3="-5.69276854" z3="0.86192024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27577899" y3="-2.19591351" z3="-0.17098369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13420118" y3="-3.29569041" z3="-1.0294751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49171719" y3="-4.45433116" z3="-0.61024642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99544053" y3="-4.50822233" z3="0.68670189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1427977" y3="-3.44747092" z3="1.57543676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77633067" y3="-2.29135388" z3="1.13773612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4903241" y3="-3.22634303" z3="-2.06057619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35122716" y3="-5.29651272" z3="-1.28825739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25890511" y3="-5.69642416" z3="1.11942119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73647441" y3="-3.52692785" z3="2.58481438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86896202" y3="-1.44198648" z3="1.81594762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48605282" y3="4.01697096" z3="0.05791849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85759946" y3="3.80640795" z3="-0.00198123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40152627" y3="3.29316744" z3="-1.17413161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61584081" y3="3.01566774" z3="-2.28955952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2453272" y3="3.22659245" z3="-2.21283886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03655826" y3="4.3758256" z3="0.9863975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50201929" y3="4.01084921" z3="0.85408381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83775083" y3="3.00762209" z3="-1.22647208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08023098" y3="2.62700359" z3="-3.19683165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38461624" y3="2.98489435" z3="-3.06939046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16555431" y3="-5.90615526" z3="2.30784904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7654377" y3="-6.40033918" z3="0.25717233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3253455" y3="2.73752725" z3="-2.30275718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46118531" y3="3.03955255" z3="-0.18201149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6177648" y3="0.16025603" z3="-2.03020293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94340968" y3="1.40807553" z3="-1.89205264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79583451" y3="0.08640934" z3="-2.8237921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27231006" y3="1.1921637" z3="-3.48319855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31018082" y3="-0.87570703" z3="-2.90990048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17589998" y3="1.12309276" z3="-4.0952834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44524727" y3="2.52708312" z3="-2.6141664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57780792" y3="2.42197685" z3="-3.38546269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9148076" y3="3.47988363" z3="-2.55805068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94205337" y3="3.29522326" z3="-3.93402391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58264885" y3="3.9065511" z3="-0.25690683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76619275" y3="5.0588103" z3="-0.06090447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9340773" y3="3.9589061" z3="0.18708749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45499094" y3="5.1042273" z3="0.7396893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56240276" y3="3.07128932" z3="0.09110322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49615585" y3="5.11835069" z3="1.07419745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33792126" y3="6.23392003" z3="0.50053926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65492284" y3="6.26275569" z3="0.88662175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70200342" y3="7.11490658" z3="0.63063252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08323947" y3="7.17033516" z3="1.32092958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34573956" y3="-3.9392719" z3="-2.875978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52715207" y3="-4.97473927" z3="-2.54949149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21714358" y3="-3.6171805" z3="-3.47674244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46930934" y3="-3.93335494" z3="-3.5432847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69534731" y3="-1.60220314" z3="-2.09752902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43184964" y3="-1.12922727" z3="-2.77220488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53275761" y3="-0.93977775" z3="-1.23277837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74553313" y3="-1.64460215" z3="-2.65411283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9137,-.9549,-.683;6.5945,-1.9534,-1.5513;6.0779,-.9984,-1.4145;4.7717,1.4767,-1.0696;4.2841,.3118,-.5024;2.654,2.7408,-1.1518;4.0047,2.7364,-.8511;2.3834,4.9981,-.3744;1.8096,3.8568,-.8833;1.759,5.8745,-.1742;2.0846,1.6159,-1.6743;3.1261,.3612,.2186;1.7097,.3884,-.6346;.6083,.7383,.297;1.656,-.852,-1.4986;1.0933,-2.4702,-1.3191;2.0401,-5.4886,-6.2665;1.7701,-5.054,-5.2998;1.0617,-3.9129,-2.8457;1.734,-3.6733,-5.1538;1.481,-5.8806,-4.211;1.1413,-5.3039,-2.9937;1.3891,-3.071,-3.9333;1.9666,-3.006,-5.9876;1.5337,-6.9684,-4.3037;.9533,-5.9368,-2.122;.6548,-3.3647,-1.6025;-.3445,-3.8497,-.8572;-.6844,-4.8536,-1.1248;-.3818,-3.5452,.5907;-.4152,-3.0644,3.3485;-.6885,-4.5782,1.4848;-.1122,-2.2668,1.0887;-.1256,-2.0286,2.4588;-.6967,-4.3398,2.858;-.8793,-5.5863,1.1067;.0959,-1.4283,.4233;.1,-1.0199,2.8151;-.9015,-5.1629,3.5481;-.415,-2.8812,4.427;1.3401,-1.7352,-3.9044;1.4693,-1.3286,-3.0018;.3385,3.7178,-1.0359;-2.1318,-2.9901,-1.7136;-2.9197,-3.1671,-.5721;-3.1145,-2.2916,.3587;-3.841,-.725,.6138;-4.6983,-.2503,-.9735;-2.533,.446,1.2108;-5.0882,-1.0672,1.9661;-3.4015,-4.3789,-.3355;-4.1197,-4.6178,.8653;-3.9979,.0595,-1.7645;-5.3698,.6064,-.7829;-5.312,-1.0826,-1.3625;-1.6433,.551,.5638;-2.1727,.1348,2.2067;-3.001,1.4427,1.3148;-5.5506,-.1201,2.299;-5.8998,-1.7334,1.6239;-4.6019,-1.5316,2.842;-5.0585,-4.0394,.8784;-3.5108,-4.3592,1.7454;-4.3463,-5.6928,.8619;4.2758,-2.1959,-.171;4.1342,-3.2957,-1.0295;3.4917,-4.4543,-.6102;2.9954,-4.5082,.6867;3.1428,-3.4475,1.5754;3.7763,-2.2914,1.1377;4.4903,-3.2263,-2.0606;3.3512,-5.2965,-1.2883;2.2589,-5.6964,1.1194;2.7365,-3.5269,2.5848;3.869,-1.442,1.8159;-.4861,4.017,.0579;-1.8576,3.8064,-.002;-2.4015,3.2932,-1.1741;-1.6158,3.0157,-2.2896;-.2453,3.2266,-2.2128;-.0366,4.3758,.9864;-2.502,4.0108,.8541;-3.8378,3.0076,-1.2265;-2.0802,2.627,-3.1968;.3846,2.9849,-3.0694;2.1656,-5.9062,2.3078;1.7654,-6.4003,.2572;-4.3253,2.7375,-2.3028;-4.4612,3.0396,-.182;6.6178,.1603,-2.0302;5.9434,1.4081,-1.8921;7.7958,.0864,-2.8238;8.2723,1.1922,-3.4832;8.3102,-.8757,-2.9099;9.1759,1.1231,-4.0953;6.4452,2.5271,-2.6142;7.5778,2.422,-3.3855;5.9148,3.4799,-2.5581;7.9421,3.2952,-3.934;4.5826,3.9066,-.2569;3.7662,5.0588,-.0609;5.9341,3.9589,.1871;6.455,5.1042,.7397;6.5624,3.0713,.0911;7.4962,5.1184,1.0742;4.3379,6.2339,.5005;5.6549,6.2628,.8866;3.702,7.1149,.6306;6.0832,7.1703,1.3209;-2.3457,-3.9393,-2.876;-2.5272,-4.9747,-2.5495;-3.2171,-3.6172,-3.4767;-1.4693,-3.9334,-3.5433;-1.6953,-1.6022,-2.0975;-2.4318,-1.1292,-2.7722;-1.5328,-.9398,-1.2328;-.7455,-1.6446,-2.6541;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662924580460</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002175610512 0.000239726928 0.018411276331 0.005357890443</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057091047 -0.000338377 0.000046717 0.000321033 0.000372019 0.000423664 0.000498182 0.000532447 0.000650777 0.000790308 0.000844907 0.000994484 0.001162747 0.001219701 0.001370099 0.001420853 0.001551777 0.001741647 0.002201890 0.002354696 0.002557430 0.002695096 0.002863805 0.003508470 0.003651707 0.003881731 0.004379790 0.004717615 0.004862007 0.005052201 0.005262316 0.005354204 0.006336254 0.006371764 0.006716168 0.006976725 0.007225080 0.007585834 0.008167953 0.008716806 0.008895778 0.009515882 0.009811272 0.010383050 0.011148009 0.011168143 0.011835900 0.012535592 0.013329945 0.013690625 0.014018770 0.014625894 0.014989778 0.015472718 0.015830771 0.016609357 0.017088275 0.018564807 0.018895390 0.019439104 0.020356536 0.020599210 0.021493358 0.021885320 0.022448299 0.022781799 0.023448724 0.023867927 0.024517796 0.025870694 0.026581267 0.026920866 0.027253239 0.027617705 0.028200460 0.029092983 0.030889919 0.031521065 0.032330300 0.034070966 0.034656929 0.035965447 0.039045623 0.039522940 0.041972287 0.045396084 0.046152406 0.046903157 0.048809805 0.049690357 0.049867279 0.050810071 0.051536230 0.052176236 0.052287264 0.052406730 0.052759937 0.053551650 0.054917723 0.056062684 0.056417887 0.056707042 0.057006832 0.057288328 0.057762124 0.058586895 0.059230624 0.059713166 0.061280405 0.062044381 0.062871797 0.064227382 0.064558482 0.065016968 0.066010311 0.067472113 0.067961889 0.068940503 0.070519791 0.072141396 0.072631151 0.072900387 0.073437984 0.075487336 0.078565402 0.080833762 0.081629710 0.083349008 0.084586113 0.088012777 0.088943986 0.089380883 0.089826587 0.091304157 0.093313120 0.094580761 0.095486921 0.096191124 0.096853165 0.098434310 0.100146806 0.100697010 0.102669663 0.103708781 0.104178705 0.106426357 0.108796111 0.110867898 0.112222826 0.112804442 0.113792102 0.114709262 0.116931065 0.117172343 0.118603422 0.119289348 0.120578922 0.122215748 0.125173313 0.125749555 0.128498307 0.128983410 0.130962277 0.133647228 0.136342005 0.137716676 0.138647134 0.139633445 0.140527787 0.143480166 0.144648440 0.145907075 0.146776195 0.151986319 0.153628165 0.154306133 0.160820239 0.161346161 0.168509743 0.171444243 0.175969655 0.179073368 0.181600072 0.184321347 0.189078612 0.189842334 0.191870080 0.201283186 0.202215642 0.206290125 0.206949182 0.207258255 0.212306774 0.212576609 0.215432135 0.217081594 0.220349091 0.221024322 0.223962285 0.224571341 0.225744323 0.231852403 0.234540770 0.235492000 0.238516382 0.246455533 0.249244553 0.251884887 0.256536818 0.257205188 0.258263516 0.262533197 0.271574293 0.282872518 0.292015419 0.299963230 0.300100111 0.301004621 0.307102141 0.307782290 0.309836367 0.319869873 0.321348087 0.326412037 0.330115800 0.336457502 0.347747886 0.352022572 0.355633433 0.360576853 0.361617178 0.364112985 0.384499412 0.406941074 0.414409107 0.430261077 0.432282999 0.435274674 0.450812826 0.464641558 0.475621043 0.478818961 0.480347843 0.486659347 0.498897358 0.503874174 0.515042546 0.517718974 0.543779340 0.566925896 0.567681480 0.586543344 0.592166924 0.605716887 0.644190073 0.645394857 0.667978123 0.675665231 0.687373175 0.703680087 0.704357707 0.705904864 0.709495219 0.717180707 0.733991452 0.738001624 0.739700312 0.747685963 0.750784778 0.771610819 0.775981506 0.808901718 0.821798619 0.824048679 0.828935359 0.834216929 0.847145724 0.849422788 0.851420232 0.854523620 0.863297957 0.867470745 0.875833656 0.887456743 0.891059495 0.892386717 0.893531856 0.902029492 0.910320162 0.918126578 0.924024350 0.924644146 0.931951273 0.935596193 0.956026652 0.963321188 0.965201120 0.970113519 0.978089125 0.982544946 0.998634391 1.012983119 1.015842979 1.021702356 1.040154442 1.055074066 1.070731832 1.072466029 1.079460829 1.087360873 1.108091210 1.110399001 1.115890101 1.118834634 1.122598703 1.123813143 1.141862580 1.148861281 1.161749510 1.170167675 1.177201752 1.187257638 1.200756417 1.221780623 1.233715710 1.258133056 1.296458691 1.298257903 1.314722012 1.326483174 1.327472228 1.330206597 1.331377456 1.334784522 1.342138788 1.348772238 1.365414181 1.379994400 1.381309596 1.381817645 1.429227271 1.517189075 1.557986577 1.684732796 1.922914157</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">228</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91397415" y3="-0.95408653" z3="-0.68053908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59285938" y3="-1.9542116" z3="-1.55114889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07676248" y3="-0.99894179" z3="-1.41447132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77184725" y3="1.47712978" z3="-1.07012466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28524364" y3="0.31309348" z3="-0.50015443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.654125" y3="2.7412604" z3="-1.14901741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00548693" y3="2.73721973" z3="-0.85184786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38610174" y3="5.00057988" z3="-0.37662726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81086179" y3="3.85814103" z3="-0.88063623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76261528" y3="5.87760788" z3="-0.17806199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08270589" y3="1.61594024" z3="-1.66809367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12897631" y3="0.36396032" z3="0.22360699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71041642" y3="0.38955082" z3="-0.62617624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61088491" y3="0.73962643" z3="0.30742467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65527888" y3="-0.85161933" z3="-1.48887979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09474149" y3="-2.47134982" z3="-1.31342571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04878803" y3="-5.48179311" z3="-6.26460299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77739308" y3="-5.04880093" z3="-5.29754991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06570331" y3="-3.91192696" z3="-2.8423281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.74258571" y3="-3.66869278" z3="-5.1485452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48502937" y3="-5.87706106" z3="-4.21116907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14371856" y3="-5.30247684" z3="-2.99324176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3956933" y3="-3.06839382" z3="-3.92759944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9773894" y3="-3.0000852" z3="-5.98033442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53633746" y3="-6.96449755" z3="-4.3062773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95294401" y3="-5.93694072" z3="-2.12358971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65706583" y3="-3.36552656" z3="-1.59892958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34404143" y3="-3.85074595" z3="-0.85643596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68345064" y3="-4.85449447" z3="-1.12528877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38526308" y3="-3.54650862" z3="0.59135786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42645293" y3="-3.06654363" z3="3.3485663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69394192" y3="-4.58037126" z3="1.48412494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1167098" y3="-2.26830017" z3="1.09056621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13382659" y3="-2.0306224" z3="2.46036345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70593941" y3="-4.34254046" z3="2.85713095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88181245" y3="-5.59022865" z3="1.10602846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09369542" y3="-1.42969319" z3="0.42584503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09056701" y3="-1.02169852" z3="2.81751077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91287515" y3="-5.16594729" z3="3.54560049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42889078" y3="-2.88387952" z3="4.42697643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34732338" y3="-1.73273784" z3="-3.89663196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47381626" y3="-1.32721581" z3="-2.99302641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33961701" y3="3.71779509" z3="-1.02927958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12972361" y3="-2.99040883" z3="-1.71620022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92046767" y3="-3.16997997" z3="-0.57715818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11892901" y3="-2.29575029" z3="0.3544734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84251059" y3="-0.7287329" z3="0.61128248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69551246" y3="-0.24933768" z3="-0.9779201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53434505" y3="0.4392633" z3="1.21365339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09385989" y3="-1.07147071" z3="1.96005389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40226104" y3="-4.38225158" z3="-0.34467153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12396235" y3="-4.62402244" z3="0.85380671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99257897" y3="0.06407296" z3="-1.76603593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36815025" y3="0.60674816" z3="-0.78767794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30861365" y3="-1.08029551" z3="-1.37248313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64117493" y3="0.54392441" z3="0.57017902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17829619" y3="0.12604622" z3="2.21079989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0001133" y3="1.43652936" z3="1.31789057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55491328" y3="-0.12447554" z3="2.29376001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90608799" y3="-1.73530732" z3="1.61497483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6106844" y3="-1.53905022" z3="2.83665358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06092093" y3="-4.04419676" z3="0.86727631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51688935" y3="-4.36879594" z3="1.73578651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3525333" y3="-5.69753944" z3="0.84623319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27619686" y3="-2.19437566" z3="-0.16677396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1348074" y3="-3.29544891" z3="-1.02397058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49173319" y3="-4.45356088" z3="-0.60368155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99414818" y3="-4.50534908" z3="0.692833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14162211" y3="-3.44344035" z3="1.58047275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77619356" y3="-2.28806199" z3="1.14185966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49149541" y3="-3.22764901" z3="-2.05499196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35156463" y3="-5.29693244" z3="-1.28066355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25584679" y3="-5.69236637" z3="1.12596372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73448031" y3="-3.52132476" z3="2.58964052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86903066" y3="-1.43789319" z3="1.81921719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4825313" y3="4.01542501" z3="0.06495698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8533955" y3="3.80184004" z3="0.01077164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40008559" y3="3.29225284" z3="-1.16211028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61753205" y3="3.01947328" z3="-2.28188353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2463074" y3="3.22866953" z3="-2.20553881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03000759" y3="4.3710735" z3="0.9942396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49604512" y3="4.00404883" z3="0.86795561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83606125" y3="3.00654627" z3="-1.2122112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08370836" y3="2.63314552" z3="-3.18880341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38102918" y3="2.99144703" z3="-3.06734906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16042419" y3="-5.90052054" z3="2.31452406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7631323" y3="-6.39693552" z3="0.26379573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3260783" y3="2.74156804" z3="-2.28893462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4571734" y3="3.03364554" z3="-0.16614755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61552593" y3="0.15867243" z3="-2.03298587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94166942" y3="1.40688294" z3="-1.8952331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79163889" y3="0.08312831" z3="-2.82936964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26667794" y3="1.1876469" z3="-3.4917914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30550362" y3="-0.87934985" z3="-2.9152456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16865057" y3="1.11724665" z3="-4.10613656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44195795" y3="2.5245306" z3="-2.62048327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57262461" y3="2.41782592" z3="-3.39434163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91185197" y3="3.4775426" z3="-2.56485196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93566716" y3="3.29007691" z3="-3.94522323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58506006" y3="3.90878817" z3="-0.2619094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76959057" y3="5.06187563" z3="-0.06669437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93762825" y3="3.96186158" z3="0.17829929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46085684" y3="5.10868982" z3="0.72563947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56495405" y3="3.07361821" z3="0.08387701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50313517" y3="5.12340737" z3="1.05670674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34320791" y3="6.2383116" z3="0.49038811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66157395" y3="6.26789094" z3="0.87195363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.7077085" y3="7.11989729" z3="0.62131884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09149613" y3="7.17659858" z3="1.3025183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34045884" y3="-3.93748948" z3="-2.88084831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51901341" y3="-4.97442907" z3="-2.55749731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21297315" y3="-3.61661998" z3="-3.48127788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46349528" y3="-3.92663349" z3="-3.54736828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69446308" y3="-1.60094874" z3="-2.09668465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4303929" y3="-1.12789764" z3="-2.7718741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53397586" y3="-0.93956893" z3="-1.2307455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7431389" y3="-1.64110746" z3="-2.65109362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.914,-.9541,-.6805;6.5929,-1.9542,-1.5511;6.0768,-.9989,-1.4145;4.7718,1.4771,-1.0701;4.2852,.3131,-.5002;2.6541,2.7413,-1.149;4.0055,2.7372,-.8518;2.3861,5.0006,-.3766;1.8109,3.8581,-.8806;1.7626,5.8776,-.1781;2.0827,1.6159,-1.6681;3.129,.364,.2236;1.7104,.3896,-.6262;.6109,.7396,.3074;1.6553,-.8516,-1.4889;1.0947,-2.4713,-1.3134;2.0488,-5.4818,-6.2646;1.7774,-5.0488,-5.2975;1.0657,-3.9119,-2.8423;1.7426,-3.6687,-5.1485;1.485,-5.8771,-4.2112;1.1437,-5.3025,-2.9932;1.3957,-3.0684,-3.9276;1.9774,-3.0001,-5.9803;1.5363,-6.9645,-4.3063;.9529,-5.9369,-2.1236;.6571,-3.3655,-1.5989;-.344,-3.8507,-.8564;-.6835,-4.8545,-1.1253;-.3853,-3.5465,.5914;-.4265,-3.0665,3.3486;-.6939,-4.5804,1.4841;-.1167,-2.2683,1.0906;-.1338,-2.0306,2.4604;-.7059,-4.3425,2.8571;-.8818,-5.5902,1.106;.0937,-1.4297,.4258;.0906,-1.0217,2.8175;-.9129,-5.1659,3.5456;-.4289,-2.8839,4.427;1.3473,-1.7327,-3.8966;1.4738,-1.3272,-2.993;.3396,3.7178,-1.0293;-2.1297,-2.9904,-1.7162;-2.9205,-3.17,-.5772;-3.1189,-2.2958,.3545;-3.8425,-.7287,.6113;-4.6955,-.2493,-.9779;-2.5343,.4393,1.2137;-5.0939,-1.0715,1.9601;-3.4023,-4.3823,-.3447;-4.124,-4.624,.8538;-3.9926,.0641,-1.766;-5.3682,.6067,-.7877;-5.3086,-1.0803,-1.3725;-1.6412,.5439,.5702;-2.1783,.126,2.2108;-3.0001,1.4365,1.3179;-5.5549,-.1245,2.2938;-5.9061,-1.7353,1.615;-4.6107,-1.5391,2.8367;-5.0609,-4.0442,.8673;-3.5169,-4.3688,1.7358;-4.3525,-5.6975,.8462;4.2762,-2.1944,-.1668;4.1348,-3.2954,-1.024;3.4917,-4.4536,-.6037;2.9941,-4.5053,.6928;3.1416,-3.4434,1.5805;3.7762,-2.2881,1.1419;4.4915,-3.2276,-2.055;3.3516,-5.2969,-1.2807;2.2558,-5.6924,1.126;2.7345,-3.5213,2.5896;3.869,-1.4379,1.8192;-.4825,4.0154,.065;-1.8534,3.8018,.0108;-2.4001,3.2923,-1.1621;-1.6175,3.0195,-2.2819;-.2463,3.2287,-2.2055;-.03,4.3711,.9942;-2.496,4.004,.868;-3.8361,3.0065,-1.2122;-2.0837,2.6331,-3.1888;.381,2.9914,-3.0673;2.1604,-5.9005,2.3145;1.7631,-6.3969,.2638;-4.3261,2.7416,-2.2889;-4.4572,3.0336,-.1661;6.6155,.1587,-2.033;5.9417,1.4069,-1.8952;7.7916,.0831,-2.8294;8.2667,1.1876,-3.4918;8.3055,-.8793,-2.9152;9.1687,1.1172,-4.1061;6.442,2.5245,-2.6205;7.5726,2.4178,-3.3943;5.9119,3.4775,-2.5649;7.9357,3.2901,-3.9452;4.5851,3.9088,-.2619;3.7696,5.0619,-.0667;5.9376,3.9619,.1783;6.4609,5.1087,.7256;6.565,3.0736,.0839;7.5031,5.1234,1.0567;4.3432,6.2383,.4904;5.6616,6.2679,.872;3.7077,7.1199,.6213;6.0915,7.1766,1.3025;-2.3405,-3.9375,-2.8808;-2.519,-4.9744,-2.5575;-3.213,-3.6166,-3.4813;-1.4635,-3.9266,-3.5474;-1.6945,-1.6009,-2.0967;-2.4304,-1.1279,-2.7719;-1.534,-.9396,-1.2307;-.7431,-1.6411,-2.6511;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662920362101</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001880594999 0.000238038912 0.021562862439 0.005300334353</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057090984 -0.000260265 0.000052903 0.000337089 0.000383556 0.000427866 0.000497956 0.000530552 0.000651510 0.000791025 0.000846464 0.000994906 0.001163988 0.001222763 0.001375428 0.001422420 0.001551911 0.001754370 0.002207718 0.002354897 0.002557051 0.002714271 0.002863425 0.003509201 0.003654755 0.003889484 0.004382835 0.004736880 0.004868505 0.005054055 0.005267608 0.005358241 0.006338447 0.006372224 0.006715973 0.006977230 0.007225690 0.007586657 0.008173833 0.008724200 0.008899557 0.009521915 0.009815907 0.010386704 0.011158042 0.011172896 0.011837957 0.012535856 0.013330608 0.013690863 0.014021124 0.014627390 0.014990102 0.015472890 0.015832410 0.016609649 0.017088331 0.018567330 0.018899504 0.019439615 0.020357036 0.020603847 0.021493551 0.021890974 0.022449469 0.022782311 0.023450537 0.023867743 0.024517736 0.025871199 0.026582388 0.026922094 0.027253238 0.027632244 0.028200547 0.029092977 0.030889931 0.031522037 0.032330460 0.034071667 0.034657124 0.035973418 0.039045733 0.039524013 0.041972707 0.045396049 0.046161163 0.046909181 0.048816800 0.049690396 0.049870799 0.050814231 0.051536230 0.052177693 0.052287350 0.052406847 0.052763440 0.053553286 0.054919686 0.056066063 0.056418660 0.056707029 0.057007783 0.057288594 0.057762502 0.058586933 0.059230728 0.059715631 0.061282692 0.062044348 0.062874568 0.064228956 0.064560308 0.065026662 0.066010522 0.067472871 0.067967103 0.068948727 0.070521007 0.072142606 0.072631609 0.072900335 0.073438480 0.075487561 0.078580859 0.080833940 0.081629648 0.083349219 0.084586488 0.088012043 0.088944766 0.089382176 0.089828372 0.091305595 0.093314457 0.094580784 0.095487250 0.096191502 0.096853235 0.098445022 0.100147143 0.100697850 0.102676364 0.103709974 0.104178999 0.106428539 0.108800675 0.110872967 0.112230018 0.112805188 0.113792581 0.114713252 0.116930910 0.117174558 0.118605144 0.119292355 0.120578929 0.122224259 0.125173163 0.125759504 0.128500442 0.128989217 0.130963219 0.133653853 0.136342628 0.137720564 0.138647441 0.139633741 0.140527747 0.143482784 0.144649562 0.145907629 0.146780034 0.151987008 0.153627360 0.154306585 0.160821878 0.161353296 0.168517021 0.171444167 0.175970007 0.179073492 0.181599893 0.184325432 0.189083411 0.189845589 0.191870496 0.201290745 0.202215549 0.206293607 0.206949649 0.207258408 0.212313776 0.212577337 0.215456080 0.217085733 0.220350816 0.221024536 0.224191498 0.224571464 0.225800907 0.231852444 0.234540840 0.235507251 0.238530274 0.246456001 0.249243788 0.251898257 0.256540039 0.257205196 0.258265109 0.262538891 0.271574938 0.282877405 0.292016325 0.299963554 0.300100967 0.301007278 0.307103114 0.307782562 0.309838133 0.319876207 0.321349634 0.326413186 0.330116948 0.336464181 0.347748539 0.352023054 0.355633513 0.360614982 0.361618179 0.364113127 0.384500483 0.406950222 0.414426963 0.430261115 0.432305209 0.435275042 0.450821158 0.464641544 0.475622283 0.478819083 0.480358548 0.486659566 0.498897396 0.503883543 0.515073542 0.517766663 0.543779986 0.566925919 0.567681497 0.586546126 0.592166520 0.605717303 0.644208828 0.645395227 0.667983402 0.675665241 0.687373212 0.703746197 0.704358000 0.705919043 0.709503607 0.717183977 0.733992024 0.738002492 0.739701283 0.747685823 0.750784789 0.771610971 0.775981510 0.808913225 0.821801483 0.824048725 0.828935486 0.834223158 0.847147282 0.849423855 0.851420933 0.854523931 0.863300727 0.867470753 0.875841924 0.887456826 0.891059520 0.892403926 0.893531785 0.902037410 0.910323978 0.918136269 0.924029103 0.924644740 0.931958293 0.935606545 0.956027656 0.963321493 0.965207860 0.970114526 0.978159573 0.982565684 0.998636689 1.012986012 1.015864581 1.021730326 1.040164314 1.055074069 1.070786889 1.072496381 1.079461164 1.087361677 1.108177630 1.110405277 1.116176652 1.118837140 1.122601898 1.123831619 1.141862576 1.148876622 1.161750521 1.170170909 1.177209309 1.187262045 1.200756439 1.221780922 1.233792453 1.258133381 1.296462050 1.298261132 1.314722279 1.326483282 1.327474983 1.330206364 1.331377565 1.334788139 1.342174797 1.348793546 1.365436389 1.379995197 1.381314255 1.381821054 1.429227152 1.517209426 1.557986608 1.684732911 1.922920985</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">229</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91313169" y3="-0.9539287" z3="-0.6808104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5902739" y3="-1.95437359" z3="-1.55409087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07423157" y3="-0.999148" z3="-1.41728771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76970869" y3="1.476854" z3="-1.07294135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28480223" y3="0.31343907" z3="-0.50026741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65183254" y3="2.74167473" z3="-1.14653743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00422218" y3="2.73731064" z3="-0.85331855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38684091" y3="5.00179841" z3="-0.37464733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8098484" y3="3.85931398" z3="-0.8769374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76393595" y3="5.87934864" z3="-0.17372577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07828913" y3="1.61616347" z3="-1.66304968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13052062" y3="0.36534225" z3="0.22654964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70980387" y3="0.38961248" z3="-0.61974555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61223975" y3="0.73852317" z3="0.31659876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65386918" y3="-0.85183744" z3="-1.48214799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09500583" y3="-2.47207896" z3="-1.30978017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.07035089" y3="-5.48160854" z3="-6.25691592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79420872" y3="-5.04879197" z3="-5.29109758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07093635" y3="-3.91225136" z3="-2.83900234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75850709" y3="-3.66845553" z3="-5.14205467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49682101" y3="-5.8774192" z3="-4.20621977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14980177" y3="-5.30302316" z3="-2.98977339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40592275" y3="-3.06838843" z3="-3.92257948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.99740069" y3="-2.99964787" z3="-5.97262913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54886583" y3="-6.96506132" z3="-4.30115333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9557106" y3="-5.9377097" z3="-2.12083692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65809339" y3="-3.36604335" z3="-1.59695244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34427282" y3="-3.85251408" z3="-0.85646441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68342453" y3="-4.85577323" z3="-1.12732065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38800806" y3="-3.55051625" z3="0.5916517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43513967" y3="-3.07348638" z3="3.3498363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70264166" y3="-4.58385544" z3="1.48259238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11681302" y3="-2.27404717" z3="1.09299411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13711953" y3="-2.03755616" z3="2.46325385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7176958" y3="-4.34729174" z3="2.85605983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8947933" y3="-5.59044797" z3="1.10193889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09813096" y3="-1.43574751" z3="0.42956761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0895537" y3="-1.0301803" z3="2.82214671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92857573" y3="-5.17061963" z3="3.54387041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44042285" y3="-2.89159887" z3="4.4285822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35792115" y3="-1.73267588" z3="-3.89128215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48041004" y3="-1.32758497" z3="-2.98698966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3380509" y3="3.72044392" z3="-1.02341185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12740211" y3="-2.98976691" z3="-1.71857002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9210637" y3="-3.1690681" z3="-0.58146623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11903168" y3="-2.29647404" z3="0.35130876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84295107" y3="-0.72927682" z3="0.60914113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69195918" y3="-0.24713189" z3="-0.98044744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53479655" y3="0.43672771" z3="1.21625592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09640014" y3="-1.07419559" z3="1.95487568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40575884" y3="-4.38081883" z3="-0.35098388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13126015" y3="-4.62166413" z3="0.84513435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98684943" y3="0.06993667" z3="-1.7648547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36758633" y3="0.60609705" z3="-0.78806268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3004359" y3="-1.07918162" z3="-1.37911926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64265463" y3="0.54388845" z3="0.57259188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17824147" y3="0.11945583" z3="2.21179007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00076409" y3="1.43367273" z3="1.32442423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55846502" y3="-0.12719425" z3="2.28878217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90791369" y3="-1.73763117" z3="1.60720575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61469641" y3="-1.54244735" z3="2.83142619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06914484" y3="-4.04192257" z3="0.85397785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52740777" y3="-4.36530706" z3="1.72978994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35897314" y3="-5.69659089" z3="0.83799282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2763816" y3="-2.19403043" z3="-0.1652174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13505202" y3="-3.29582942" z3="-1.02130336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49148054" y3="-4.45321184" z3="-0.6002016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99337629" y3="-4.50386801" z3="0.69611345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14132823" y3="-3.44149559" z3="1.58289825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77641202" y3="-2.28673495" z3="1.14352366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49184062" y3="-3.22910614" z3="-2.05233145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35090691" y3="-5.29656886" z3="-1.27664395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2540474" y3="-5.69013565" z3="1.12989674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73396167" y3="-3.51847136" z3="2.5920101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8693852" y3="-1.43624695" z3="1.82032477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48191473" y3="4.0149889" z3="0.07470181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85356791" y3="3.80449676" z3="0.01939318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40220537" y3="3.29755047" z3="-1.15350545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62095266" y3="3.02459945" z3="-2.27321079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25005804" y3="3.23412372" z3="-2.20018255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02824102" y3="4.36919081" z3="1.00334065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.4946622" y3="4.00510039" z3="0.8785221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83885975" y3="3.01356739" z3="-1.20261397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08904285" y3="2.64050799" z3="-3.18059277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37687333" y3="2.99574339" z3="-3.06025677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15708873" y3="-5.89690924" z3="2.31855653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76194477" y3="-6.39536045" z3="0.26798021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33088186" y3="2.75211413" z3="-2.27926133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45806748" y3="3.0373665" z3="-0.15522941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61116569" y3="0.15785608" z3="-2.03858103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93715995" y3="1.40585303" z3="-1.90125179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78551746" y3="0.08186876" z3="-2.8372876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25844549" y3="1.18558091" z3="-3.50260273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29976389" y3="-0.88027365" z3="-2.92250502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15917913" y3="1.11491437" z3="-4.11850959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43491183" y3="2.52244944" z3="-2.62987164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56376441" y3="2.4152128" z3="-3.40614507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.904159" y3="3.47496114" z3="-2.57511155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92488056" y3="3.28658918" z3="-3.95969999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58611738" y3="3.90912436" z3="-0.26577084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7715512" y3="5.06263989" z3="-0.06905633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9400015" y3="3.96214986" z3="0.17072166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46478773" y3="5.10923593" z3="0.71620108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56708948" y3="3.07364798" z3="0.07476043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50774482" y3="5.12388835" z3="1.04492093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34734386" y3="6.2394743" z3="0.48472319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66654599" y3="6.26895307" z3="0.86310606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71291512" y3="7.12131851" z3="0.61469994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0980857" y3="7.17798124" z3="1.2913147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33610692" y3="-3.93561141" z3="-2.8846161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5161267" y3="-4.97248218" z3="-2.56227341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20641829" y3="-3.61353615" z3="-3.48680054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45774311" y3="-3.92561605" z3="-3.5492986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68855685" y3="-1.6009559" z3="-2.09639268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42209737" y3="-1.12546158" z3="-2.77237175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52931908" y3="-0.94170946" z3="-1.22872244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73630321" y3="-1.64203659" z3="-2.64919278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9131,-.9539,-.6808;6.5903,-1.9544,-1.5541;6.0742,-.9991,-1.4173;4.7697,1.4769,-1.0729;4.2848,.3134,-.5003;2.6518,2.7417,-1.1465;4.0042,2.7373,-.8533;2.3868,5.0018,-.3746;1.8098,3.8593,-.8769;1.7639,5.8793,-.1737;2.0783,1.6162,-1.663;3.1305,.3653,.2265;1.7098,.3896,-.6197;.6122,.7385,.3166;1.6539,-.8518,-1.4821;1.095,-2.4721,-1.3098;2.0704,-5.4816,-6.2569;1.7942,-5.0488,-5.2911;1.0709,-3.9123,-2.839;1.7585,-3.6685,-5.1421;1.4968,-5.8774,-4.2062;1.1498,-5.303,-2.9898;1.4059,-3.0684,-3.9226;1.9974,-2.9996,-5.9726;1.5489,-6.9651,-4.3012;.9557,-5.9377,-2.1208;.6581,-3.366,-1.597;-.3443,-3.8525,-.8565;-.6834,-4.8558,-1.1273;-.388,-3.5505,.5917;-.4351,-3.0735,3.3498;-.7026,-4.5839,1.4826;-.1168,-2.274,1.093;-.1371,-2.0376,2.4633;-.7177,-4.3473,2.8561;-.8948,-5.5904,1.1019;.0981,-1.4357,.4296;.0896,-1.0302,2.8221;-.9286,-5.1706,3.5439;-.4404,-2.8916,4.4286;1.3579,-1.7327,-3.8913;1.4804,-1.3276,-2.987;.3381,3.7204,-1.0234;-2.1274,-2.9898,-1.7186;-2.9211,-3.1691,-.5815;-3.119,-2.2965,.3513;-3.843,-.7293,.6091;-4.692,-.2471,-.9804;-2.5348,.4367,1.2163;-5.0964,-1.0742,1.9549;-3.4058,-4.3808,-.351;-4.1313,-4.6217,.8451;-3.9868,.0699,-1.7649;-5.3676,.6061,-.7881;-5.3004,-1.0792,-1.3791;-1.6427,.5439,.5726;-2.1782,.1195,2.2118;-3.0008,1.4337,1.3244;-5.5585,-.1272,2.2888;-5.9079,-1.7376,1.6072;-4.6147,-1.5424,2.8314;-5.0691,-4.0419,.854;-3.5274,-4.3653,1.7298;-4.359,-5.6966,.838;4.2764,-2.194,-.1652;4.1351,-3.2958,-1.0213;3.4915,-4.4532,-.6002;2.9934,-4.5039,.6961;3.1413,-3.4415,1.5829;3.7764,-2.2867,1.1435;4.4918,-3.2291,-2.0523;3.3509,-5.2966,-1.2766;2.254,-5.6901,1.1299;2.734,-3.5185,2.592;3.8694,-1.4362,1.8203;-.4819,4.015,.0747;-1.8536,3.8045,.0194;-2.4022,3.2976,-1.1535;-1.621,3.0246,-2.2732;-.2501,3.2341,-2.2002;-.0282,4.3692,1.0033;-2.4947,4.0051,.8785;-3.8389,3.0136,-1.2026;-2.089,2.6405,-3.1806;.3769,2.9957,-3.0603;2.1571,-5.8969,2.3186;1.7619,-6.3954,.268;-4.3309,2.7521,-2.2793;-4.4581,3.0374,-.1552;6.6112,.1579,-2.0386;5.9372,1.4059,-1.9013;7.7855,.0819,-2.8373;8.2584,1.1856,-3.5026;8.2998,-.8803,-2.9225;9.1592,1.1149,-4.1185;6.4349,2.5224,-2.6299;7.5638,2.4152,-3.4061;5.9042,3.475,-2.5751;7.9249,3.2866,-3.9597;4.5861,3.9091,-.2658;3.7716,5.0626,-.0691;5.94,3.9621,.1707;6.4648,5.1092,.7162;6.5671,3.0736,.0748;7.5077,5.1239,1.0449;4.3473,6.2395,.4847;5.6665,6.269,.8631;3.7129,7.1213,.6147;6.0981,7.178,1.2913;-2.3361,-3.9356,-2.8846;-2.5161,-4.9725,-2.5623;-3.2064,-3.6135,-3.4868;-1.4577,-3.9256,-3.5493;-1.6886,-1.601,-2.0964;-2.4221,-1.1255,-2.7724;-1.5293,-.9417,-1.2287;-.7363,-1.642,-2.6492;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662918308944</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001488236315 0.000209723608 0.021156693197 0.005330068496</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057091051 -0.000245165 0.000067588 0.000308840 0.000373230 0.000425243 0.000498083 0.000528323 0.000651152 0.000795792 0.000845831 0.000996009 0.001165320 0.001223767 0.001390470 0.001422256 0.001553131 0.001767912 0.002206963 0.002355387 0.002556857 0.002732833 0.002863648 0.003509175 0.003654765 0.003893860 0.004385120 0.004749264 0.004879290 0.005061274 0.005275306 0.005360422 0.006344168 0.006373725 0.006716230 0.006978484 0.007225614 0.007587480 0.008188273 0.008727867 0.008904627 0.009526654 0.009817014 0.010386243 0.011163079 0.011201608 0.011839734 0.012536885 0.013330759 0.013691444 0.014022987 0.014627484 0.014990113 0.015474121 0.015836854 0.016610711 0.017088144 0.018569606 0.018906762 0.019440962 0.020358519 0.020608981 0.021493668 0.021897866 0.022451478 0.022782194 0.023452902 0.023867666 0.024517767 0.025872862 0.026584180 0.026921741 0.027253222 0.027638189 0.028200629 0.029093462 0.030889983 0.031522366 0.032330298 0.034074446 0.034657392 0.035982906 0.039045917 0.039525428 0.041972740 0.045396051 0.046162707 0.046913281 0.048826249 0.049690404 0.049874320 0.050814480 0.051536331 0.052178605 0.052287477 0.052407326 0.052766487 0.053554439 0.054922534 0.056071691 0.056418529 0.056707499 0.057008169 0.057288281 0.057762522 0.058587153 0.059231329 0.059716721 0.061284380 0.062044349 0.062876642 0.064228870 0.064562221 0.065034192 0.066010503 0.067472780 0.067970983 0.068956438 0.070522565 0.072142671 0.072632319 0.072900176 0.073438401 0.075487479 0.078600978 0.080835891 0.081630064 0.083349729 0.084586522 0.088012012 0.088946989 0.089383181 0.089830278 0.091305502 0.093314727 0.094580785 0.095487386 0.096192173 0.096854420 0.098458457 0.100147386 0.100698563 0.102679715 0.103710367 0.104179448 0.106431247 0.108812175 0.110879840 0.112238455 0.112806510 0.113794875 0.114718872 0.116931783 0.117176264 0.118608660 0.119298052 0.120579024 0.122231037 0.125174626 0.125766691 0.128503033 0.128994766 0.130969273 0.133660640 0.136343891 0.137728029 0.138651748 0.139633870 0.140528216 0.143491096 0.144654054 0.145907813 0.146781510 0.151986718 0.153626719 0.154306664 0.160822990 0.161354223 0.168526939 0.171444463 0.175970738 0.179073908 0.181599704 0.184335298 0.189090489 0.189850221 0.191876245 0.201296695 0.202216254 0.206295554 0.206950223 0.207258695 0.212323743 0.212577291 0.215479290 0.217085623 0.220351392 0.221024680 0.224342223 0.224572451 0.225849057 0.231852525 0.234540990 0.235523105 0.238539326 0.246456493 0.249254066 0.251909384 0.256544724 0.257205258 0.258265816 0.262543814 0.271575249 0.282883537 0.292016883 0.299965747 0.300103310 0.301013398 0.307105590 0.307782561 0.309839625 0.319899427 0.321351166 0.326415047 0.330118335 0.336465426 0.347750182 0.352023310 0.355633627 0.360644174 0.361618835 0.364113598 0.384501140 0.406953382 0.414429345 0.430261638 0.432313161 0.435275100 0.450832706 0.464641514 0.475625179 0.478819502 0.480365313 0.486661166 0.498897482 0.503899848 0.515086536 0.517804110 0.543779942 0.566925938 0.567681776 0.586550424 0.592173894 0.605720783 0.644221346 0.645395377 0.667991120 0.675665271 0.687374214 0.703802382 0.704358253 0.705919144 0.709530929 0.717190671 0.733996721 0.738004071 0.739701250 0.747690506 0.750784793 0.771611018 0.775981511 0.808927461 0.821804246 0.824049130 0.828935594 0.834225202 0.847148830 0.849424011 0.851422710 0.854524620 0.863301697 0.867470757 0.875844535 0.887456938 0.891063944 0.892415902 0.893533238 0.902039192 0.910323938 0.918136090 0.924048094 0.924645569 0.931964428 0.935620368 0.956030273 0.963321737 0.965210461 0.970114770 0.978161060 0.982569609 0.998639426 1.012986021 1.015881052 1.021750551 1.040173510 1.055074077 1.070826935 1.072518255 1.079465025 1.087361917 1.108241563 1.110408708 1.116366449 1.118837968 1.122603327 1.123842528 1.141863414 1.148891876 1.161752741 1.170172397 1.177211240 1.187266329 1.200756625 1.221782568 1.233840022 1.258133619 1.296465183 1.298264350 1.314722627 1.326483314 1.327479908 1.330207723 1.331377648 1.334788131 1.342227590 1.348810671 1.365482441 1.379995365 1.381315571 1.381821301 1.429240248 1.517244005 1.557986782 1.684733727 1.922921428</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">230</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91194701" y3="-0.95439212" z3="-0.68379824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58697221" y3="-1.95451457" z3="-1.56182422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07105187" y3="-0.99941048" z3="-1.42358822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76743673" y3="1.47652245" z3="-1.0752417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2839048" y3="0.31296151" z3="-0.50175056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64946642" y3="2.74109212" z3="-1.14406137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00231271" y3="2.73671636" z3="-0.8536481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38625097" y3="5.00096739" z3="-0.37146706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80818612" y3="3.85868287" z3="-0.87252403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76412632" y3="5.87840352" z3="-0.17113209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07486949" y3="1.61589592" z3="-1.65982788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13103575" y3="0.36490826" z3="0.22729953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70888651" y3="0.38867399" z3="-0.61656413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61257072" y3="0.7362988" z3="0.32163177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65216866" y3="-0.8523069" z3="-1.47945401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09682191" y3="-2.47341347" z3="-1.30648662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.09150758" y3="-5.48511819" z3="-6.24765521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.81057255" y3="-5.05193807" z3="-5.28343546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0767336" y3="-3.91449948" z3="-2.83489142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77274518" y3="-3.6716916" z3="-5.13551635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50912591" y3="-5.88004787" z3="-4.19931633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15666812" y3="-5.3051543" z3="-2.98476446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.4146036" y3="-3.07112057" z3="-3.91795236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.01430915" y3="-3.00317284" z3="-5.96553435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56253552" y3="-6.96759509" z3="-4.29323291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95986545" y3="-5.9394691" z3="-2.1162827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66122538" y3="-3.36810594" z3="-1.59379941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34271349" y3="-3.85390522" z3="-0.8556153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.681669" y3="-4.85696658" z3="-1.12772179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38932354" y3="-3.55300331" z3="0.5927868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44479548" y3="-3.08004403" z3="3.3511719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70594509" y3="-4.5882591" z3="1.48120834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11975238" y3="-2.27667745" z3="1.09679326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14387936" y3="-2.04275858" z3="2.4672985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7250994" y3="-4.35396147" z3="2.85481278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89450193" y3="-5.59676345" z3="1.09937443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0968567" y3="-1.43677635" z3="0.4356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0814005" y3="-1.03547489" z3="2.82853886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93866004" y3="-5.17836409" z3="3.54000963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45308644" y3="-2.9001244" z3="4.43006806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36495146" y3="-1.73545006" z3="-3.88834406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48286696" y3="-1.32897363" z3="-2.98399488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33615489" y3="3.72062982" z3="-1.01667002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12485904" y3="-2.98995877" z3="-1.71933805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92017454" y3="-3.16785876" z3="-0.58311111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11890979" y3="-2.29351709" z3="0.3482942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84184638" y3="-0.72615525" z3="0.60554552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68186556" y3="-0.23917407" z3="-0.98781244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53444104" y3="0.43656908" z3="1.21874751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10216287" y3="-1.06979061" z3="1.94554724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40679844" y3="-4.37876355" z3="-0.3530671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13360268" y3="-4.61918511" z3="0.8425483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.97156774" y3="0.08171687" z3="-1.76577656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3589173" y3="0.61364643" z3="-0.79856216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.28834606" y3="-1.0689095" z3="-1.39431058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64176709" y3="0.54609392" z3="0.57578416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17814573" y3="0.11501537" z3="2.21295569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00018869" y3="1.43327204" z3="1.33074894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56370787" y3="-0.12273815" z3="2.27826815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91319745" y3="-1.73181301" z3="1.59459258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.62489196" y3="-1.53938153" z3="2.82409735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06903861" y3="-4.03648475" z3="0.85302415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52869822" y3="-4.36690658" z3="1.72683817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36587562" y3="-5.6918051" z3="0.83310284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27671673" y3="-2.19454246" z3="-0.16647747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13756217" y3="-3.29821325" z3="-1.02063524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49512744" y3="-4.45573437" z3="-0.59794717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99489325" y3="-4.50408795" z3="0.69764891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14092905" y3="-3.43991497" z3="1.58273416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77586764" y3="-2.28564497" z3="1.14212557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49506607" y3="-3.23315809" z3="-2.05155202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35706529" y3="-5.3011356" z3="-1.27280499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25504633" y3="-5.68951898" z3="1.13241452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7321858" y3="-3.51515286" z3="2.59145593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86771205" y3="-1.43415504" z3="1.81775753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48248888" y3="4.01731377" z3="0.08059139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85434286" y3="3.80795148" z3="0.02858425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40526789" y3="3.30341411" z3="-1.14436727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62590391" y3="3.03058258" z3="-2.26615272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25380123" y3="3.23530758" z3="-2.19244529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02692828" y3="4.36986369" z3="1.00928531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49425456" y3="4.00915638" z3="0.88820033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84223572" y3="3.02159051" z3="-1.19201691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09541797" y3="2.64785099" z3="-3.17291655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37137733" y3="2.99736054" z3="-3.0554388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15625577" y3="-5.89383914" z3="2.32128358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76446304" y3="-6.39661874" z3="0.27111211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33605404" y3="2.7647431" z3="-2.26885437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.45981556" y3="3.04219454" z3="-0.14390447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60605556" y3="0.15759041" z3="-2.04654174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93274495" y3="1.40578268" z3="-1.90654375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77753141" y3="0.08138163" z3="-2.84969612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24833412" y3="1.18515463" z3="-3.51642298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.2911042" y3="-0.88105131" z3="-2.93742455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.14660963" y3="1.11417017" z3="-4.13613244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42866141" y3="2.52277163" z3="-2.63578881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55469575" y3="2.41533609" z3="-3.41630751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89871781" y3="3.47577286" z3="-2.57788419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91429742" y3="3.28695982" z3="-3.97045809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58530648" y3="3.90817641" z3="-0.26703493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.77123449" y3="5.06160493" z3="-0.06806956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.94021229" y3="3.96080255" z3="0.16623693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46652826" y3="5.10744596" z3="0.71076136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56693952" y3="3.07242122" z3="0.06874091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.51047508" y3="5.12177883" z3="1.03671981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3480871" y3="6.23787383" z3="0.485637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66837046" y3="6.26693671" z3="0.86071545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71356326" y3="7.11975105" z3="0.61936681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.10072185" y3="7.1755029" z3="1.28889371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33353366" y3="-3.93649914" z3="-2.88471203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.51393001" y3="-4.97322134" z3="-2.56155256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20395433" y3="-3.61513113" z3="-3.48778393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45461243" y3="-3.92668787" z3="-3.54868946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68548328" y3="-1.60134713" z3="-2.09800753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41907064" y3="-1.12606576" z3="-2.77429744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52488348" y3="-0.940974" z3="-1.23121107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73351887" y3="-1.64335471" z3="-2.6508483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9119,-.9544,-.6838;6.587,-1.9545,-1.5618;6.0711,-.9994,-1.4236;4.7674,1.4765,-1.0752;4.2839,.313,-.5018;2.6495,2.7411,-1.1441;4.0023,2.7367,-.8536;2.3863,5.001,-.3715;1.8082,3.8587,-.8725;1.7641,5.8784,-.1711;2.0749,1.6159,-1.6598;3.131,.3649,.2273;1.7089,.3887,-.6166;.6126,.7363,.3216;1.6522,-.8523,-1.4795;1.0968,-2.4734,-1.3065;2.0915,-5.4851,-6.2477;1.8106,-5.0519,-5.2834;1.0767,-3.9145,-2.8349;1.7727,-3.6717,-5.1355;1.5091,-5.88,-4.1993;1.1567,-5.3052,-2.9848;1.4146,-3.0711,-3.918;2.0143,-3.0032,-5.9655;1.5625,-6.9676,-4.2932;.9599,-5.9395,-2.1163;.6612,-3.3681,-1.5938;-.3427,-3.8539,-.8556;-.6817,-4.857,-1.1277;-.3893,-3.553,.5928;-.4448,-3.08,3.3512;-.7059,-4.5883,1.4812;-.1198,-2.2767,1.0968;-.1439,-2.0428,2.4673;-.7251,-4.354,2.8548;-.8945,-5.5968,1.0994;.0969,-1.4368,.4356;.0814,-1.0355,2.8285;-.9387,-5.1784,3.54;-.4531,-2.9001,4.4301;1.365,-1.7355,-3.8883;1.4829,-1.329,-2.984;.3362,3.7206,-1.0167;-2.1249,-2.99,-1.7193;-2.9202,-3.1679,-.5831;-3.1189,-2.2935,.3483;-3.8418,-.7262,.6055;-4.6819,-.2392,-.9878;-2.5344,.4366,1.2187;-5.1022,-1.0698,1.9455;-3.4068,-4.3788,-.3531;-4.1336,-4.6192,.8425;-3.9716,.0817,-1.7658;-5.3589,.6136,-.7986;-5.2883,-1.0689,-1.3943;-1.6418,.5461,.5758;-2.1781,.115,2.213;-3.0002,1.4333,1.3307;-5.5637,-.1227,2.2783;-5.9132,-1.7318,1.5946;-4.6249,-1.5394,2.8241;-5.069,-4.0365,.853;-3.5287,-4.3669,1.7268;-4.3659,-5.6918,.8331;4.2767,-2.1945,-.1665;4.1376,-3.2982,-1.0206;3.4951,-4.4557,-.5979;2.9949,-4.5041,.6976;3.1409,-3.4399,1.5827;3.7759,-2.2856,1.1421;4.4951,-3.2332,-2.0516;3.3571,-5.3011,-1.2728;2.255,-5.6895,1.1324;2.7322,-3.5152,2.5915;3.8677,-1.4342,1.8178;-.4825,4.0173,.0806;-1.8543,3.808,.0286;-2.4053,3.3034,-1.1444;-1.6259,3.0306,-2.2662;-.2538,3.2353,-2.1924;-.0269,4.3699,1.0093;-2.4943,4.0092,.8882;-3.8422,3.0216,-1.192;-2.0954,2.6479,-3.1729;.3714,2.9974,-3.0554;2.1563,-5.8938,2.3213;1.7645,-6.3966,.2711;-4.3361,2.7647,-2.2689;-4.4598,3.0422,-.1439;6.6061,.1576,-2.0465;5.9327,1.4058,-1.9065;7.7775,.0814,-2.8497;8.2483,1.1852,-3.5164;8.2911,-.8811,-2.9374;9.1466,1.1142,-4.1361;6.4287,2.5228,-2.6358;7.5547,2.4153,-3.4163;5.8987,3.4758,-2.5779;7.9143,3.287,-3.9705;4.5853,3.9082,-.267;3.7712,5.0616,-.0681;5.9402,3.9608,.1662;6.4665,5.1074,.7108;6.5669,3.0724,.0687;7.5105,5.1218,1.0367;4.3481,6.2379,.4856;5.6684,6.2669,.8607;3.7136,7.1198,.6194;6.1007,7.1755,1.2889;-2.3335,-3.9365,-2.8847;-2.5139,-4.9732,-2.5616;-3.204,-3.6151,-3.4878;-1.4546,-3.9267,-3.5487;-1.6855,-1.6013,-2.098;-2.4191,-1.1261,-2.7743;-1.5249,-.941,-1.2312;-.7335,-1.6434,-2.6508;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662915899862</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001265815916 0.000192033308 0.020281096827 0.005445044166</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057091121 -0.000189289 0.000056485 0.000294722 0.000381163 0.000424811 0.000498655 0.000535745 0.000651110 0.000799951 0.000849389 0.000996429 0.001165014 0.001223768 0.001394210 0.001423865 0.001553061 0.001777755 0.002209834 0.002357686 0.002557491 0.002742417 0.002865016 0.003510890 0.003654658 0.003896433 0.004384843 0.004760066 0.004885137 0.005064649 0.005285638 0.005363636 0.006345851 0.006380721 0.006716055 0.006980702 0.007225721 0.007587406 0.008198502 0.008732595 0.008906891 0.009526963 0.009817752 0.010386390 0.011163048 0.011223669 0.011842472 0.012537099 0.013330985 0.013691711 0.014024196 0.014627590 0.014990525 0.015473786 0.015842492 0.016611334 0.017087940 0.018569993 0.018915845 0.019442456 0.020359395 0.020620105 0.021493799 0.021899635 0.022452967 0.022782273 0.023453704 0.023868621 0.024517678 0.025875599 0.026586068 0.026921613 0.027253325 0.027645434 0.028200912 0.029095508 0.030889977 0.031522602 0.032330700 0.034077841 0.034657454 0.035990859 0.039046655 0.039527872 0.041972746 0.045395888 0.046164557 0.046914403 0.048834388 0.049690453 0.049876634 0.050814500 0.051536388 0.052179765 0.052287563 0.052407788 0.052769044 0.053555035 0.054924754 0.056076909 0.056418776 0.056708077 0.057008939 0.057287343 0.057762998 0.058587855 0.059232623 0.059718722 0.061284904 0.062044335 0.062878511 0.064229240 0.064563125 0.065039157 0.066011023 0.067473576 0.067972077 0.068959291 0.070523418 0.072142571 0.072632718 0.072900002 0.073439291 0.075487506 0.078621046 0.080839283 0.081631084 0.083350287 0.084586397 0.088015047 0.088946753 0.089383717 0.089832792 0.091305392 0.093314769 0.094580756 0.095488001 0.096192527 0.096855334 0.098474832 0.100147071 0.100699147 0.102681385 0.103710466 0.104180854 0.106434312 0.108824726 0.110882964 0.112246449 0.112807959 0.113800565 0.114728757 0.116931652 0.117176463 0.118610751 0.119302090 0.120579022 0.122233670 0.125179770 0.125770480 0.128504312 0.129002500 0.130976338 0.133661579 0.136343990 0.137736324 0.138655168 0.139634171 0.140528551 0.143498220 0.144657017 0.145909206 0.146783040 0.151986822 0.153625868 0.154307405 0.160823053 0.161354397 0.168533776 0.171445022 0.175971923 0.179075959 0.181599558 0.184345032 0.189093702 0.189852660 0.191886666 0.201299725 0.202216166 0.206296916 0.206950855 0.207259141 0.212335182 0.212577423 0.215499056 0.217086217 0.220351306 0.221026247 0.224444408 0.224573289 0.225887465 0.231852529 0.234541017 0.235530878 0.238543310 0.246456405 0.249256431 0.251913093 0.256546969 0.257205409 0.258267107 0.262547830 0.271575524 0.282887402 0.292017414 0.299966030 0.300104344 0.301019313 0.307107457 0.307782611 0.309840737 0.319927894 0.321351972 0.326416890 0.330118084 0.336465757 0.347750958 0.352023445 0.355633759 0.360673454 0.361620478 0.364114298 0.384502958 0.406959963 0.414438267 0.430263603 0.432320194 0.435277661 0.450843898 0.464641681 0.475625121 0.478821137 0.480372743 0.486661031 0.498897872 0.503919552 0.515107361 0.517826983 0.543780494 0.566925973 0.567681789 0.586558978 0.592174333 0.605723790 0.644239579 0.645395378 0.667998915 0.675665690 0.687374177 0.703866815 0.704358250 0.705930132 0.709550623 0.717197034 0.734001456 0.738004751 0.739706075 0.747693680 0.750784895 0.771611044 0.775981547 0.808937887 0.821808373 0.824051263 0.828936209 0.834227603 0.847151343 0.849425003 0.851422763 0.854527347 0.863301945 0.867470865 0.875847055 0.887457037 0.891068660 0.892425918 0.893539052 0.902039391 0.910324401 0.918136960 0.924059103 0.924645611 0.931971510 0.935641714 0.956033938 0.963323591 0.965214174 0.970114972 0.978167466 0.982575143 0.998641943 1.012986448 1.015895904 1.021773740 1.040182686 1.055074448 1.070870414 1.072550087 1.079469681 1.087362187 1.108282099 1.110411245 1.116509584 1.118839614 1.122604213 1.123848040 1.141865409 1.148904075 1.161755093 1.170172727 1.177211354 1.187268136 1.200756807 1.221783474 1.233873607 1.258133670 1.296466070 1.298267193 1.314723121 1.326483300 1.327486927 1.330212939 1.331379311 1.334788397 1.342252773 1.348825317 1.365552514 1.379995368 1.381318503 1.381823240 1.429244050 1.517242332 1.557986870 1.684734911 1.922933981</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">231</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91035634" y3="-0.95465536" z3="-0.68859494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58363552" y3="-1.95365607" z3="-1.57135218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06760898" y3="-0.99886035" z3="-1.43143726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76436291" y3="1.47636629" z3="-1.07837361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28225048" y3="0.31241594" z3="-0.50467648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64628237" y3="2.74120081" z3="-1.14171993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99964766" y3="2.73627729" z3="-0.85338257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38400708" y3="4.99919888" z3="-0.36279408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80532736" y3="3.85830925" z3="-0.86672353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.76181191" y3="5.87638554" z3="-0.15758443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07106001" y3="1.61652331" z3="-1.65815569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13065307" y3="0.36404692" z3="0.22647985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70709812" y3="0.38845296" z3="-0.61509066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61235925" y3="0.73575986" z3="0.32509981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64910055" y3="-0.85230441" z3="-1.47817152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0971801" y3="-2.47471347" z3="-1.30575841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.09607834" y3="-5.49181416" z3="-6.24295153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.81460289" y3="-5.05764478" z3="-5.2793717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07876432" y3="-3.91753754" z3="-2.83273651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.77869487" y3="-3.6774133" z3="-5.13243502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.51039664" y3="-5.88450326" z3="-4.19510597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15720247" y3="-5.30833592" z3="-2.98142425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41949817" y3="-3.07549081" z3="-3.91585309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.02253722" y3="-3.00993028" z3="-5.9625649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.56216541" y3="-6.97206239" z3="-4.28820271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95851626" y3="-5.94184363" z3="-2.11282255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66196654" y3="-3.36941279" z3="-1.59285254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34160151" y3="-3.8557034" z3="-0.85408343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68042893" y3="-4.85878271" z3="-1.1260471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38842012" y3="-3.55515006" z3="0.59421298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4413247" y3="-3.08504815" z3="3.3534751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70524292" y3="-4.59070717" z3="1.48217195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11751638" y3="-2.27998169" z3="1.09905523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14089037" y3="-2.0470122" z3="2.4699567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72320387" y3="-4.35771901" z3="2.85616143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89749844" y3="-5.59601985" z3="1.09852217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09933272" y3="-1.43989231" z3="0.43823864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08543162" y3="-1.040665" z3="2.8320356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93610885" y3="-5.18276727" z3="3.54150781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44892016" y3="-2.90582163" z3="4.43267859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.37171185" y3="-1.73996981" z3="-3.88718094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48673386" y3="-1.33290794" z3="-2.98309216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33324981" y3="3.72177168" z3="-1.01095346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12377056" y3="-2.99260344" z3="-1.72032948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91901908" y3="-3.16601505" z3="-0.58365272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11641987" y3="-2.28892274" z3="0.34519126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83946091" y3="-0.72008994" z3="0.59715016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66982982" y3="-0.23189281" z3="-1.00053475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53253454" y3="0.43978483" z3="1.2174354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10789541" y3="-1.06144791" z3="1.92988838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40666832" y3="-4.37594311" z3="-0.34923985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13232608" y3="-4.611249" z3="0.84795812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.95418268" y3="0.09324043" z3="-1.77178893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35226382" y3="0.61672691" z3="-0.812765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.26806496" y3="-1.06387226" z3="-1.41399778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63941245" y3="0.55033781" z3="0.57539301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17731262" y3="0.11459393" z3="2.21085651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99808521" y3="1.43618285" z3="1.33227668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57073876" y3="-0.11289626" z3="2.25811624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91769911" y3="-1.72298651" z3="1.57444122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.63632462" y3="-1.53022307" z3="2.81168457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06790827" y3="-4.02817177" z3="0.85605763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52690905" y3="-4.3547259" z3="1.73147445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36380523" y3="-5.68531774" z3="0.84384186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27722402" y3="-2.19500428" z3="-0.16899087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13784346" y3="-3.29998589" z3="-1.02119044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49670143" y3="-4.45726752" z3="-0.59586593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99825106" y3="-4.50439808" z3="0.70043419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14495124" y3="-3.4390918" z3="1.5837185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77838367" y3="-2.28487607" z3="1.14049107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49390747" y3="-3.23617278" z3="-2.05268008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35785614" y3="-5.30306994" z3="-1.26932208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25943511" y3="-5.68963067" z3="1.13791666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73774913" y3="-3.51335666" z3="2.59311679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87046978" y3="-1.43242835" z3="1.81478027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48511671" y3="4.01772965" z3="0.08783398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85729701" y3="3.81171041" z3="0.03355229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40839607" y3="3.30917225" z3="-1.14013177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62879019" y3="3.03503384" z3="-2.26090928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25707799" y3="3.238718" z3="-2.18788541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.02962176" y3="4.36894035" z3="1.01689642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49728671" y3="4.0132654" z3="0.89310162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84586717" y3="3.03041761" z3="-1.18890422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09863981" y3="2.65411785" z3="-3.16862067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36862264" y3="2.99910671" z3="-3.04888445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16208001" y3="-5.89226756" z3="2.32725793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76806458" y3="-6.39801507" z3="0.27811521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34040768" y3="2.77883282" z3="-2.26673663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46303941" y3="3.04754839" z3="-0.1403049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60072038" y3="0.15863415" z3="-2.05516972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92766382" y3="1.40658019" z3="-1.91248989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77012725" y3="0.08343068" z3="-2.86132297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.23915785" y3="1.18795219" z3="-3.52807411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28356687" y3="-0.87876315" z3="-2.95130229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.13585722" y3="1.1177828" z3="-4.14999408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42160421" y3="2.5243053" z3="-2.64191235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54573426" y3="2.41785015" z3="-3.42518885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89151098" y3="3.47692426" z3="-2.58227272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90392904" y3="3.28999878" z3="-3.97941931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58356791" y3="3.90624188" z3="-0.26452161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76952245" y3="5.0589736" z3="-0.0610094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93894641" y3="3.95777307" z3="0.16730294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46533808" y3="5.10276402" z3="0.71547115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56579522" y3="3.06970001" z3="0.06600697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50939163" y3="5.11629613" z3="1.04069199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34685202" y3="6.23367695" z3="0.49561622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66725197" y3="6.26173391" z3="0.86984059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.71262633" y3="7.11489714" z3="0.63135967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09997502" y3="7.16899304" z3="1.30051893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33228673" y3="-3.94303789" z3="-2.88267082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5174021" y3="-4.97756009" z3="-2.55589936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.19950658" y3="-3.6204999" z3="-3.48920929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45167206" y3="-3.93956276" z3="-3.54452085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68245093" y3="-1.60598397" z3="-2.10330224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4158697" y3="-1.13150874" z3="-2.77995078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52031127" y3="-0.94396775" z3="-1.23818001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73081258" y3="-1.65087738" z3="-2.65678506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9104,-.9547,-.6886;6.5836,-1.9537,-1.5714;6.0676,-.9989,-1.4314;4.7644,1.4764,-1.0784;4.2823,.3124,-.5047;2.6463,2.7412,-1.1417;3.9996,2.7363,-.8534;2.384,4.9992,-.3628;1.8053,3.8583,-.8667;1.7618,5.8764,-.1576;2.0711,1.6165,-1.6582;3.1307,.364,.2265;1.7071,.3885,-.6151;.6124,.7358,.3251;1.6491,-.8523,-1.4782;1.0972,-2.4747,-1.3058;2.0961,-5.4918,-6.243;1.8146,-5.0576,-5.2794;1.0788,-3.9175,-2.8327;1.7787,-3.6774,-5.1324;1.5104,-5.8845,-4.1951;1.1572,-5.3083,-2.9814;1.4195,-3.0755,-3.9159;2.0225,-3.0099,-5.9626;1.5622,-6.9721,-4.2882;.9585,-5.9418,-2.1128;.662,-3.3694,-1.5929;-.3416,-3.8557,-.8541;-.6804,-4.8588,-1.126;-.3884,-3.5552,.5942;-.4413,-3.085,3.3535;-.7052,-4.5907,1.4822;-.1175,-2.28,1.0991;-.1409,-2.047,2.47;-.7232,-4.3577,2.8562;-.8975,-5.596,1.0985;.0993,-1.4399,.4382;.0854,-1.0407,2.832;-.9361,-5.1828,3.5415;-.4489,-2.9058,4.4327;1.3717,-1.74,-3.8872;1.4867,-1.3329,-2.9831;.3332,3.7218,-1.011;-2.1238,-2.9926,-1.7203;-2.919,-3.166,-.5837;-3.1164,-2.2889,.3452;-3.8395,-.7201,.5972;-4.6698,-.2319,-1.0005;-2.5325,.4398,1.2174;-5.1079,-1.0614,1.9299;-3.4067,-4.3759,-.3492;-4.1323,-4.6112,.848;-3.9542,.0932,-1.7718;-5.3523,.6167,-.8128;-5.2681,-1.0639,-1.414;-1.6394,.5503,.5754;-2.1773,.1146,2.2109;-2.9981,1.4362,1.3323;-5.5707,-.1129,2.2581;-5.9177,-1.723,1.5744;-4.6363,-1.5302,2.8117;-5.0679,-4.0282,.8561;-3.5269,-4.3547,1.7315;-4.3638,-5.6853,.8438;4.2772,-2.195,-.169;4.1378,-3.3,-1.0212;3.4967,-4.4573,-.5959;2.9983,-4.5044,.7004;3.145,-3.4391,1.5837;3.7784,-2.2849,1.1405;4.4939,-3.2362,-2.0527;3.3579,-5.3031,-1.2693;2.2594,-5.6896,1.1379;2.7377,-3.5134,2.5931;3.8705,-1.4324,1.8148;-.4851,4.0177,.0878;-1.8573,3.8117,.0336;-2.4084,3.3092,-1.1401;-1.6288,3.035,-2.2609;-.2571,3.2387,-2.1879;-.0296,4.3689,1.0169;-2.4973,4.0133,.8931;-3.8459,3.0304,-1.1889;-2.0986,2.6541,-3.1686;.3686,2.9991,-3.0489;2.1621,-5.8923,2.3273;1.7681,-6.398,.2781;-4.3404,2.7788,-2.2667;-4.463,3.0475,-.1403;6.6007,.1586,-2.0552;5.9277,1.4066,-1.9125;7.7701,.0834,-2.8613;8.2392,1.188,-3.5281;8.2836,-.8788,-2.9513;9.1359,1.1178,-4.15;6.4216,2.5243,-2.6419;7.5457,2.4179,-3.4252;5.8915,3.4769,-2.5823;7.9039,3.29,-3.9794;4.5836,3.9062,-.2645;3.7695,5.059,-.061;5.9389,3.9578,.1673;6.4653,5.1028,.7155;6.5658,3.0697,.066;7.5094,5.1163,1.0407;4.3469,6.2337,.4956;5.6673,6.2617,.8698;3.7126,7.1149,.6314;6.1,7.169,1.3005;-2.3323,-3.943,-2.8827;-2.5174,-4.9776,-2.5559;-3.1995,-3.6205,-3.4892;-1.4517,-3.9396,-3.5445;-1.6825,-1.606,-2.1033;-2.4159,-1.1315,-2.78;-1.5203,-.944,-1.2382;-.7308,-1.6509,-2.6568;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662913957220</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001424710473 0.000182567634 0.017577881838 0.005345474629</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057091296 -0.000165227 0.000029469 0.000312336 0.000381336 0.000424007 0.000498644 0.000532322 0.000651270 0.000802604 0.000852695 0.000997690 0.001165823 0.001227085 0.001396063 0.001425377 0.001553117 0.001783495 0.002213994 0.002358866 0.002557228 0.002742642 0.002866400 0.003511108 0.003654473 0.003897207 0.004385476 0.004768410 0.004887872 0.005068203 0.005296223 0.005364375 0.006345502 0.006389152 0.006716156 0.006980114 0.007225936 0.007587593 0.008206216 0.008735243 0.008907085 0.009527113 0.009818568 0.010390137 0.011164699 0.011229236 0.011843139 0.012537323 0.013331242 0.013692044 0.014024453 0.014627524 0.014991119 0.015473888 0.015844662 0.016611838 0.017087852 0.018570040 0.018927702 0.019444683 0.020359502 0.020623630 0.021493829 0.021902244 0.022453324 0.022782298 0.023453989 0.023870683 0.024517669 0.025878042 0.026587069 0.026921613 0.027253314 0.027648104 0.028201668 0.029099365 0.030889930 0.031522650 0.032327955 0.034085205 0.034657552 0.036001506 0.039047601 0.039528866 0.041973052 0.045396719 0.046166399 0.046916698 0.048845259 0.049690611 0.049879836 0.050814531 0.051536399 0.052180499 0.052287635 0.052408006 0.052771986 0.053555267 0.054925632 0.056083093 0.056418823 0.056709938 0.057009193 0.057287166 0.057762862 0.058588554 0.059233642 0.059718796 0.061284896 0.062044611 0.062880776 0.064229498 0.064563866 0.065043308 0.066011045 0.067475960 0.067974106 0.068959926 0.070524270 0.072142475 0.072632743 0.072900023 0.073438472 0.075487285 0.078643185 0.080843172 0.081634857 0.083350231 0.084588333 0.088013776 0.088946812 0.089384272 0.089833632 0.091306676 0.093314859 0.094580768 0.095490229 0.096192611 0.096855547 0.098491452 0.100146824 0.100700870 0.102681598 0.103712094 0.104182684 0.106438961 0.108841000 0.110884537 0.112254565 0.112808591 0.113803841 0.114735143 0.116931675 0.117177151 0.118611153 0.119304432 0.120579181 0.122235489 0.125182914 0.125773393 0.128504651 0.129006999 0.130984630 0.133662553 0.136343947 0.137739066 0.138659522 0.139635261 0.140528571 0.143503442 0.144662668 0.145910189 0.146784490 0.151987091 0.153627231 0.154308174 0.160823446 0.161354943 0.168536225 0.171445240 0.175974664 0.179077306 0.181599480 0.184352334 0.189096788 0.189852917 0.191893383 0.201301181 0.202219188 0.206297385 0.206951322 0.207259712 0.212344076 0.212577476 0.215511174 0.217086693 0.220352072 0.221026692 0.224491018 0.224574582 0.225907410 0.231852971 0.234541014 0.235531282 0.238546554 0.246456910 0.249270444 0.251918906 0.256549117 0.257206052 0.258270971 0.262550208 0.271575581 0.282892837 0.292017622 0.299965997 0.300105573 0.301026138 0.307109428 0.307782604 0.309840814 0.319959509 0.321352637 0.326418918 0.330118575 0.336466683 0.347751323 0.352023441 0.355634018 0.360697546 0.361621883 0.364114964 0.384504236 0.406965150 0.414447443 0.430265374 0.432330799 0.435278539 0.450852989 0.464641829 0.475627685 0.478823009 0.480379795 0.486661640 0.498897998 0.503924706 0.515111035 0.517842190 0.543781268 0.566926127 0.567682086 0.586570081 0.592180910 0.605728630 0.644247630 0.645395455 0.668005790 0.675665775 0.687374166 0.703898209 0.704358486 0.705932945 0.709578349 0.717204603 0.734004934 0.738005898 0.739708302 0.747693947 0.750784916 0.771611049 0.775981574 0.808948178 0.821810792 0.824055700 0.828937054 0.834227884 0.847153615 0.849426161 0.851423783 0.854534730 0.863302597 0.867471082 0.875847328 0.887457126 0.891080117 0.892426637 0.893543147 0.902040085 0.910325204 0.918136838 0.924067251 0.924646814 0.931974837 0.935653982 0.956038456 0.963323591 0.965215168 0.970116683 0.978167341 0.982576298 0.998642575 1.012989375 1.015897049 1.021788073 1.040188024 1.055074646 1.070890524 1.072586419 1.079470548 1.087362173 1.108295982 1.110412458 1.116564455 1.118839576 1.122604284 1.123848618 1.141866607 1.148913236 1.161757948 1.170172797 1.177211353 1.187268755 1.200757270 1.221784788 1.233889207 1.258133605 1.296466213 1.298269862 1.314723629 1.326483248 1.327504843 1.330230705 1.331386867 1.334789058 1.342263538 1.348840783 1.365692858 1.379999170 1.381320981 1.381823204 1.429249428 1.517253630 1.557986958 1.684734964 1.922941547</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">232</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.90955026" y3="-0.95526089" z3="-0.69113546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58410331" y3="-1.952641" z3="-1.57311011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.06752883" y3="-0.99821572" z3="-1.43276813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76323119" y3="1.47621834" z3="-1.0778706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2805585" y3="0.31122309" z3="-0.50676643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64534843" y3="2.74100879" z3="-1.14146865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.9982736" y3="2.73561991" z3="-0.85144835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38209404" y3="4.99686947" z3="-0.35750748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80391506" y3="3.85717272" z3="-0.86452941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75999308" y3="5.87324705" z3="-0.1530025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07126061" y3="1.61739715" z3="-1.66162166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12767059" y3="0.36109079" z3="0.22232296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70564447" y3="0.38717217" z3="-0.62165645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60971004" y3="0.73315705" z3="0.31766917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.64844784" y3="-0.85200667" z3="-1.4870514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09774429" y3="-2.47513844" z3="-1.30962451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0808377" y3="-5.499184" z3="-6.24636638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.80331128" y3="-5.06373435" z3="-5.28224281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0768968" y3="-3.920479" z3="-2.83437882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76681554" y3="-3.6831451" z3="-5.13728305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50479159" y3="-5.88935727" z3="-4.1953822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15618785" y3="-5.3115583" z3="-2.98122168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41262339" y3="-3.0796435" z3="-3.92003791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00631355" y3="-3.01658556" z3="-5.96947492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55739097" y3="-6.97717347" z3="-4.28691107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.96160625" y3="-5.94387347" z3="-2.11073882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66347859" y3="-3.37164428" z3="-1.59369046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.33872331" y3="-3.85700402" z3="-0.85301208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.67743855" y3="-4.86069105" z3="-1.12295436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38359863" y3="-3.55393302" z3="0.59492934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43111712" y3="-3.07830946" z3="3.35328268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69569655" y3="-4.58875723" z3="1.48532053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11505928" y3="-2.27662017" z3="1.09695369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13513976" y3="-2.04135468" z3="2.46746802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71077904" y3="-4.35312056" z3="2.85891733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88380857" y3="-5.59792236" z3="1.10497808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0979968" y3="-1.43698589" z3="0.43450599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08948425" y3="-1.03332777" z3="2.8271113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92086325" y3="-5.17715789" z3="3.54550204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43628782" y3="-2.8972435" z3="4.43212878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36447589" y3="-1.74390332" z3="-3.89346046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48104797" y3="-1.33496614" z3="-2.99022273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33183528" y3="3.72139068" z3="-1.01013642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12378639" y3="-2.99708773" z3="-1.71888687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91632118" y3="-3.16584373" z3="-0.5793735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1125227" y3="-2.28386903" z3="0.3454335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83787096" y3="-0.71602601" z3="0.59264459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.66211982" y3="-0.22835734" z3="-1.00856019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53253997" y3="0.443263" z3="1.21603199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.11319049" y3="-1.05443261" z3="1.91979704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40299381" y3="-4.3746848" z3="-0.33852646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12459856" y3="-4.60567355" z3="0.86207926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.94508016" y3="0.10088724" z3="-1.77619727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.34760671" y3="0.61843944" z3="-0.82292126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.2576766" y3="-1.06023582" z3="-1.42579778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63747165" y3="0.55232133" z3="0.57642943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.18072124" y3="0.11864204" z3="2.2107605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99707391" y3="1.44040844" z3="1.32834174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.57712289" y3="-0.10549038" z3="2.24421284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.92131292" y3="-1.71617479" z3="1.56166202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6464297" y3="-1.52176409" z3="2.80513479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05956904" y3="-4.02209225" z3="0.87239363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51567228" y3="-4.34739595" z3="1.74208612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35751078" y3="-5.67839497" z3="0.86141974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.276918" y3="-2.19613051" z3="-0.17243105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13794991" y3="-3.30071853" z3="-1.02520833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49832837" y3="-4.45883152" z3="-0.60004731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00076704" y3="-4.50684474" z3="0.69657831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14666035" y3="-3.44168779" z3="1.58027825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77885824" y3="-2.28696051" z3="1.1372857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49344419" y3="-3.23613634" z3="-2.05683908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.36066742" y3="-5.30524789" z3="-1.273628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26409811" y3="-5.69325955" z3="1.13412386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74018995" y3="-3.51667876" z3="2.58992613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87086521" y3="-1.43501406" z3="1.81207288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48758082" y3="4.02018093" z3="0.08629667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8601113" y3="3.81553714" z3="0.03167579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41088799" y3="3.31289395" z3="-1.14210426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.63059692" y3="3.03737626" z3="-2.26235138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25799632" y3="3.23783077" z3="-2.18682543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03263193" y3="4.3717955" z3="1.0154311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50071104" y3="4.01876602" z3="0.89045305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84876969" y3="3.03610739" z3="-1.19206238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09994882" y3="2.65643037" z3="-3.17002631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.36772701" y3="2.99773475" z3="-3.04845333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16837506" y3="-5.89667954" z3="2.32335128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77277682" y3="-6.40195607" z3="0.27460618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.34296146" y3="2.78690098" z3="-2.27040312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46654019" y3="3.05255831" z3="-0.1440207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60082829" y3="0.160274" z3="-2.05453771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.92751651" y3="1.40793529" z3="-1.91056486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77087682" y3="0.08647777" z3="-2.85984642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24024572" y3="1.19207005" z3="-3.52461032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.28454123" y3="-0.87550476" z3="-2.95086068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.13736865" y3="1.12290256" z3="-4.14604928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.42208191" y3="2.52700054" z3="-2.63749139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.54674984" y3="2.42184604" z3="-3.42016171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89199499" y3="3.47963475" z3="-2.57618671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.90533168" y3="3.29493064" z3="-3.97267395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58140692" y3="3.90410375" z3="-0.25912683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76705308" y3="5.05614884" z3="-0.05367816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93644402" y3="3.95466163" z3="0.17405846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46233472" y3="5.09820392" z3="0.72548458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56351068" y3="3.06712509" z3="0.07129994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50624396" y3="5.11097574" z3="1.05158485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34361478" y3="6.22930191" z3="0.5068445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66382987" y3="6.256457" z3="0.88232035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70888567" y3="7.11013667" z3="0.64553362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09587633" y3="7.16249046" z3="1.31609346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33562136" y3="-3.95208664" z3="-2.87671456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52154235" y3="-4.98521746" z3="-2.54495862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20391696" y3="-3.63133289" z3="-3.483202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45618223" y3="-3.95189175" z3="-3.54011242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6833706" y3="-1.61193109" z3="-2.10836696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4180236" y3="-1.14050695" z3="-2.7863174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51992878" y3="-0.94587199" z3="-1.24634668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73283991" y3="-1.65870076" z3="-2.66330935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9096,-.9553,-.6911;6.5841,-1.9526,-1.5731;6.0675,-.9982,-1.4328;4.7632,1.4762,-1.0779;4.2806,.3112,-.5068;2.6453,2.741,-1.1415;3.9983,2.7356,-.8514;2.3821,4.9969,-.3575;1.8039,3.8572,-.8645;1.76,5.8732,-.153;2.0713,1.6174,-1.6616;3.1277,.3611,.2223;1.7056,.3872,-.6217;.6097,.7332,.3177;1.6484,-.852,-1.4871;1.0977,-2.4751,-1.3096;2.0808,-5.4992,-6.2464;1.8033,-5.0637,-5.2822;1.0769,-3.9205,-2.8344;1.7668,-3.6831,-5.1373;1.5048,-5.8894,-4.1954;1.1562,-5.3116,-2.9812;1.4126,-3.0796,-3.92;2.0063,-3.0166,-5.9695;1.5574,-6.9772,-4.2869;.9616,-5.9439,-2.1107;.6635,-3.3716,-1.5937;-.3387,-3.857,-.853;-.6774,-4.8607,-1.123;-.3836,-3.5539,.5949;-.4311,-3.0783,3.3533;-.6957,-4.5888,1.4853;-.1151,-2.2766,1.097;-.1351,-2.0414,2.4675;-.7108,-4.3531,2.8589;-.8838,-5.5979,1.105;.098,-1.437,.4345;.0895,-1.0333,2.8271;-.9209,-5.1772,3.5455;-.4363,-2.8972,4.4321;1.3645,-1.7439,-3.8935;1.481,-1.335,-2.9902;.3318,3.7214,-1.0101;-2.1238,-2.9971,-1.7189;-2.9163,-3.1658,-.5794;-3.1125,-2.2839,.3454;-3.8379,-.716,.5926;-4.6621,-.2284,-1.0086;-2.5325,.4433,1.216;-5.1132,-1.0544,1.9198;-3.403,-4.3747,-.3385;-4.1246,-4.6057,.8621;-3.9451,.1009,-1.7762;-5.3476,.6184,-.8229;-5.2577,-1.0602,-1.4258;-1.6375,.5523,.5764;-2.1807,.1186,2.2108;-2.9971,1.4404,1.3283;-5.5771,-.1055,2.2442;-5.9213,-1.7162,1.5617;-4.6464,-1.5218,2.8051;-5.0596,-4.0221,.8724;-3.5157,-4.3474,1.7421;-4.3575,-5.6784,.8614;4.2769,-2.1961,-.1724;4.1379,-3.3007,-1.0252;3.4983,-4.4588,-.6;3.0008,-4.5068,.6966;3.1467,-3.4417,1.5803;3.7789,-2.287,1.1373;4.4934,-3.2361,-2.0568;3.3607,-5.3052,-1.2736;2.2641,-5.6933,1.1341;2.7402,-3.5167,2.5899;3.8709,-1.435,1.8121;-.4876,4.0202,.0863;-1.8601,3.8155,.0317;-2.4109,3.3129,-1.1421;-1.6306,3.0374,-2.2624;-.258,3.2378,-2.1868;-.0326,4.3718,1.0154;-2.5007,4.0188,.8905;-3.8488,3.0361,-1.1921;-2.0999,2.6564,-3.17;.3677,2.9977,-3.0485;2.1684,-5.8967,2.3234;1.7728,-6.402,.2746;-4.343,2.7869,-2.2704;-4.4665,3.0526,-.144;6.6008,.1603,-2.0545;5.9275,1.4079,-1.9106;7.7709,.0865,-2.8598;8.2402,1.1921,-3.5246;8.2845,-.8755,-2.9509;9.1374,1.1229,-4.146;6.4221,2.527,-2.6375;7.5467,2.4218,-3.4202;5.892,3.4796,-2.5762;7.9053,3.2949,-3.9727;4.5814,3.9041,-.2591;3.7671,5.0561,-.0537;5.9364,3.9547,.1741;6.4623,5.0982,.7255;6.5635,3.0671,.0713;7.5062,5.111,1.0516;4.3436,6.2293,.5068;5.6638,6.2565,.8823;3.7089,7.1101,.6455;6.0959,7.1625,1.3161;-2.3356,-3.9521,-2.8767;-2.5215,-4.9852,-2.545;-3.2039,-3.6313,-3.4832;-1.4562,-3.9519,-3.5401;-1.6834,-1.6119,-2.1084;-2.418,-1.1405,-2.7863;-1.5199,-.9459,-1.2463;-.7328,-1.6587,-2.6633;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662916085623</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001228729427 0.000157852738 0.021073903929 0.005364141511</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057107607 -0.000340560 -0.000082645 0.000295151 0.000373522 0.000386834 0.000449905 0.000519409 0.000645539 0.000807760 0.000893038 0.001017679 0.001169328 0.001241257 0.001392910 0.001434800 0.001552909 0.001820592 0.002112688 0.002294013 0.002555563 0.002748846 0.002873158 0.003492508 0.003591798 0.003892248 0.004390365 0.004669732 0.004891262 0.005072662 0.005188232 0.005325058 0.006085039 0.006389680 0.006632793 0.006978336 0.007222089 0.007593227 0.008170945 0.008708514 0.008881287 0.009535734 0.009818680 0.010206665 0.010959050 0.011197151 0.011826505 0.012536792 0.013333027 0.013688071 0.014026085 0.014629466 0.014992745 0.015462380 0.015841524 0.016612686 0.017090076 0.018578036 0.018963220 0.019450338 0.020359842 0.020622837 0.021512365 0.021876830 0.022462236 0.022783328 0.023459658 0.023827271 0.024516061 0.025881926 0.026590064 0.026888003 0.027239727 0.027565329 0.028199692 0.029083093 0.030893164 0.031516912 0.032215356 0.034092166 0.034657120 0.036016137 0.039049767 0.039529571 0.041971871 0.045400790 0.046149829 0.046891988 0.048861207 0.049691534 0.049892534 0.050818557 0.051536645 0.052182069 0.052287889 0.052409221 0.052776703 0.053558235 0.054925307 0.056088808 0.056419327 0.056714583 0.057010751 0.057285985 0.057767349 0.058588925 0.059237087 0.059721088 0.061307875 0.062043272 0.062890845 0.064231297 0.064563660 0.065047773 0.066007075 0.067481988 0.067959640 0.068957864 0.070516404 0.072140603 0.072632277 0.072901180 0.073414889 0.075276782 0.078674581 0.080850211 0.081644327 0.083350557 0.084568239 0.087920444 0.088958436 0.089384072 0.089834255 0.091306197 0.093314533 0.094581125 0.095490041 0.096191004 0.096854009 0.098488979 0.100145988 0.100689478 0.102673464 0.103712788 0.104187337 0.106449539 0.108890717 0.110883248 0.112271179 0.112804345 0.113814516 0.114744628 0.116941861 0.117172657 0.118601856 0.119306780 0.120580209 0.122248830 0.125169021 0.125773233 0.128504617 0.129006959 0.130984627 0.133654971 0.136347443 0.137733813 0.138646306 0.139629609 0.140513482 0.143510677 0.144665791 0.145908105 0.146785320 0.151981161 0.153623868 0.154287279 0.160763238 0.161323875 0.168537511 0.171445297 0.175968493 0.179085297 0.181589839 0.184377306 0.189094982 0.189838858 0.191850773 0.201298475 0.202215694 0.206292520 0.206953730 0.207262048 0.212343899 0.212577783 0.215505964 0.217017213 0.220351421 0.221018077 0.224530739 0.224583184 0.225945043 0.231853239 0.234541248 0.235527316 0.238548633 0.246451833 0.249260787 0.251929523 0.256551370 0.257206303 0.258273230 0.262547700 0.271574942 0.282892265 0.292017780 0.299966597 0.300114365 0.301033263 0.307112016 0.307782574 0.309839857 0.320018580 0.321354516 0.326427742 0.330115636 0.336481462 0.347751061 0.352023801 0.355637048 0.360724623 0.361622453 0.364116686 0.384505595 0.406973326 0.414427479 0.430266642 0.432172748 0.435269973 0.450864022 0.464643185 0.475623110 0.478826909 0.480384922 0.486648669 0.498898051 0.503923300 0.515118454 0.517855241 0.543784477 0.566926155 0.567681818 0.586580257 0.592184058 0.605734933 0.644238182 0.645392663 0.668016469 0.675664963 0.687372044 0.703901504 0.704358511 0.705929271 0.709616833 0.717210330 0.734015651 0.738006494 0.739712828 0.747575235 0.750785691 0.771611033 0.775981774 0.808956482 0.821813034 0.824060474 0.828930907 0.834229164 0.847157167 0.849426777 0.851393679 0.854534007 0.863303181 0.867471183 0.875848997 0.887456951 0.891082808 0.892426232 0.893544041 0.902035623 0.910264810 0.918092371 0.923764385 0.924591899 0.931977635 0.935662334 0.956011105 0.962913690 0.965210929 0.970107792 0.978171606 0.982575962 0.998642863 1.012986646 1.015899906 1.021803503 1.040190060 1.055075803 1.070905805 1.072598507 1.079471507 1.087362119 1.108275467 1.110412187 1.116569883 1.118839572 1.122603781 1.123847640 1.141863612 1.148919995 1.161759032 1.170173978 1.177212001 1.187269022 1.200757873 1.221787313 1.233895832 1.258134224 1.296466316 1.298269948 1.314724864 1.326477512 1.327471095 1.330223538 1.331389272 1.334789988 1.342268432 1.348835918 1.365789439 1.379997815 1.381320232 1.381827775 1.429259228 1.517242237 1.557985507 1.684735873 1.922942543</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">233</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91151406" y3="-0.95523206" z3="-0.68866658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58766962" y3="-1.95207681" z3="-1.56828931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07093868" y3="-0.99768623" z3="-1.42811085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76561257" y3="1.47641911" z3="-1.07393348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28204124" y3="0.31104525" z3="-0.50441022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64745043" y3="2.74030618" z3="-1.14337104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="3.99953801" y3="2.73552677" z3="-0.8495209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38177415" y3="4.9970654" z3="-0.36300703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80507889" y3="3.8566465" z3="-0.87014942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75895937" y3="5.87371175" z3="-0.16071946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07518333" y3="1.61602044" z3="-1.66399023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12776081" y3="0.36023672" z3="0.22260006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70719959" y3="0.38660427" z3="-0.6239905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60969322" y3="0.73401657" z3="0.31294759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65118886" y3="-0.85313638" z3="-1.48867379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09656492" y3="-2.47521939" z3="-1.31168581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06797474" y3="-5.49665956" z3="-6.25267859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79285201" y3="-5.06157737" z3="-5.28765305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07204402" y3="-3.91920351" z3="-2.83761614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75778666" y3="-3.68106705" z3="-5.1417489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49605431" y3="-5.88755754" z3="-4.20061381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15026827" y3="-5.31025006" z3="-2.98532175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40646521" y3="-3.07804844" z3="-3.9234057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.99610182" y3="-3.0142553" z3="-5.97406408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54759621" y3="-6.97531542" z3="-4.29299579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95689394" y3="-5.94293836" z3="-2.11486438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.66036547" y3="-3.37022285" z3="-1.5963564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34099152" y3="-3.8557948" z3="-0.85414833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68031715" y3="-4.85924345" z3="-1.12394225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38348816" y3="-3.55339465" z3="0.5938478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42597741" y3="-3.07892475" z3="3.35227574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69412186" y3="-4.5884272" z3="1.48450606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11415291" y3="-2.27646342" z3="1.09561768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13214307" y3="-2.04144242" z3="2.46609159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70663904" y3="-4.35336975" z3="2.85814662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8845331" y3="-5.59592041" z3="1.10366371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09732225" y3="-1.43661968" z3="0.43272028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09301309" y3="-1.0337465" z3="2.82559653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91477363" y3="-5.17782561" z3="3.54527168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42897345" y3="-2.89829491" z3="4.43116561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35928959" y3="-1.74235453" z3="-3.89551693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47965606" y3="-1.33460823" z3="-2.99231233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33343619" y3="3.7199827" z3="-1.01862614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12614227" y3="-2.99506702" z3="-1.71671669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91725813" y3="-3.16506879" z3="-0.57657528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11176027" y3="-2.28458495" z3="0.34993012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83716609" y3="-0.71625674" z3="0.59837132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.67250663" y3="-0.23389367" z3="-0.99850966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53047519" y3="0.44707708" z3="1.211775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.10255579" y3="-1.05480258" z3="1.93479288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40364795" y3="-4.37429138" z3="-0.33627182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12421853" y3="-4.60601883" z3="0.86485019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.96012458" y3="0.08881675" z3="-1.7738719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35412297" y3="0.61596088" z3="-0.81179408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.27335143" y3="-1.06678891" z3="-1.40682255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63848851" y3="0.5558675" z3="0.56809303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17360874" y3="0.12610841" z3="2.20596728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99657014" y3="1.44386796" z3="1.32300115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.56495139" y3="-0.1057806" z3="2.26157313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.91293565" y3="-1.71743979" z3="1.58273592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.6290597" y3="-1.52146285" z3="2.81669367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05945568" y3="-4.02270793" z3="0.87579387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51466901" y3="-4.34740118" z3="1.74473518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35650787" y3="-5.67939886" z3="0.86442088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27777937" y3="-2.19647865" z3="-0.17220773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13750332" y3="-3.29935624" z3="-1.02705265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49683813" y3="-4.45767711" z3="-0.60387073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00020671" y3="-4.50788229" z3="0.69304742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14737655" y3="-3.44445484" z3="1.57867014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77997573" y3="-2.28912623" z3="1.13741829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49281001" y3="-3.23300259" z3="-2.05863738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35751027" y3="-5.30230849" z3="-1.27913565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26319506" y3="-5.6947636" z3="1.12899474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74153252" y3="-3.52123006" z3="2.5884207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87260173" y3="-1.43803133" z3="1.81346264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48826021" y3="4.02072534" z3="0.07564129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86016727" y3="3.81403909" z3="0.01934751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4082469" y3="3.30731852" z3="-1.15418546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62565387" y3="3.02968188" z3="-2.27216993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25381133" y3="3.23303664" z3="-2.1953532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03505908" y3="4.37453384" z3="1.00538976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50268341" y3="4.0193216" z3="0.87571293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84549749" y3="3.02804751" z3="-1.20545152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09281352" y3="2.64534601" z3="-3.1795922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37345098" y3="2.99199992" z3="-3.05579269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16823016" y3="-5.90036629" z3="2.31802869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77091708" y3="-6.40165129" z3="0.26850953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33699166" y3="2.77122184" z3="-2.28344197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46567868" y3="3.05059488" z3="-0.15875813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60552295" y3="0.16132324" z3="-2.04778978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93172848" y3="1.40883274" z3="-1.90423722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.77729804" y3="0.08820716" z3="-2.85074547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.24802004" y3="1.19436383" z3="-3.51357788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29122679" y3="-0.87370629" z3="-2.94152115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.14649529" y3="1.12574333" z3="-4.13319246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4276975" y3="2.52845649" z3="-2.62933587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55413948" y3="2.42401249" z3="-3.40961676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.89733728" y3="3.48097167" z3="-2.56867504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91382665" y3="3.29759147" z3="-3.96060031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58078249" y3="3.90464905" z3="-0.25661606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76583203" y3="5.05682896" z3="-0.05520611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93432711" y3="3.95584326" z3="0.18080567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45833661" y3="5.10012082" z3="0.73253797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56164873" y3="3.06813762" z3="0.08094727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50103951" y3="5.11348513" z3="1.06196906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34065938" y3="6.23075054" z3="0.50545208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65944431" y3="6.25853837" z3="0.88520179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70567787" y3="7.11154904" z3="0.64022126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09018863" y3="7.165181" z3="1.31900262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33931142" y3="-3.94885953" z3="-2.87553236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52432072" y3="-4.98240996" z3="-2.54482011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20836963" y3="-3.62735406" z3="-3.48005775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46097138" y3="-3.94794655" z3="-3.54044426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6862675" y3="-1.60939952" z3="-2.10499568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42184833" y3="-1.13710932" z3="-2.78102594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52185019" y3="-0.94477438" z3="-1.24228672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73629069" y3="-1.65533773" z3="-2.6611339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9115,-.9552,-.6887;6.5877,-1.9521,-1.5683;6.0709,-.9977,-1.4281;4.7656,1.4764,-1.0739;4.282,.311,-.5044;2.6475,2.7403,-1.1434;3.9995,2.7355,-.8495;2.3818,4.9971,-.363;1.8051,3.8566,-.8701;1.759,5.8737,-.1607;2.0752,1.616,-1.664;3.1278,.3602,.2226;1.7072,.3866,-.624;.6097,.734,.3129;1.6512,-.8531,-1.4887;1.0966,-2.4752,-1.3117;2.068,-5.4967,-6.2527;1.7929,-5.0616,-5.2877;1.072,-3.9192,-2.8376;1.7578,-3.6811,-5.1417;1.4961,-5.8876,-4.2006;1.1503,-5.3103,-2.9853;1.4065,-3.078,-3.9234;1.9961,-3.0143,-5.9741;1.5476,-6.9753,-4.293;.9569,-5.9429,-2.1149;.6604,-3.3702,-1.5964;-.341,-3.8558,-.8541;-.6803,-4.8592,-1.1239;-.3835,-3.5534,.5938;-.426,-3.0789,3.3523;-.6941,-4.5884,1.4845;-.1142,-2.2765,1.0956;-.1321,-2.0414,2.4661;-.7066,-4.3534,2.8581;-.8845,-5.5959,1.1037;.0973,-1.4366,.4327;.093,-1.0337,2.8256;-.9148,-5.1778,3.5453;-.429,-2.8983,4.4312;1.3593,-1.7424,-3.8955;1.4797,-1.3346,-2.9923;.3334,3.72,-1.0186;-2.1261,-2.9951,-1.7167;-2.9173,-3.1651,-.5766;-3.1118,-2.2846,.3499;-3.8372,-.7163,.5984;-4.6725,-.2339,-.9985;-2.5305,.4471,1.2118;-5.1026,-1.0548,1.9348;-3.4036,-4.3743,-.3363;-4.1242,-4.606,.8649;-3.9601,.0888,-1.7739;-5.3541,.616,-.8118;-5.2734,-1.0668,-1.4068;-1.6385,.5559,.5681;-2.1736,.1261,2.206;-2.9966,1.4439,1.323;-5.565,-.1058,2.2616;-5.9129,-1.7174,1.5827;-4.6291,-1.5215,2.8167;-5.0595,-4.0227,.8758;-3.5147,-4.3474,1.7447;-4.3565,-5.6794,.8644;4.2778,-2.1965,-.1722;4.1375,-3.2994,-1.0271;3.4968,-4.4577,-.6039;3.0002,-4.5079,.693;3.1474,-3.4445,1.5787;3.78,-2.2891,1.1374;4.4928,-3.233,-2.0586;3.3575,-5.3023,-1.2791;2.2632,-5.6948,1.129;2.7415,-3.5212,2.5884;3.8726,-1.438,1.8135;-.4883,4.0207,.0756;-1.8602,3.814,.0193;-2.4082,3.3073,-1.1542;-1.6257,3.0297,-2.2722;-.2538,3.233,-2.1954;-.0351,4.3745,1.0054;-2.5027,4.0193,.8757;-3.8455,3.028,-1.2055;-2.0928,2.6453,-3.1796;.3735,2.992,-3.0558;2.1682,-5.9004,2.318;1.7709,-6.4017,.2685;-4.337,2.7712,-2.2834;-4.4657,3.0506,-.1588;6.6055,.1613,-2.0478;5.9317,1.4088,-1.9042;7.7773,.0882,-2.8507;8.248,1.1944,-3.5136;8.2912,-.8737,-2.9415;9.1465,1.1257,-4.1332;6.4277,2.5285,-2.6293;7.5541,2.424,-3.4096;5.8973,3.481,-2.5687;7.9138,3.2976,-3.9606;4.5808,3.9046,-.2566;3.7658,5.0568,-.0552;5.9343,3.9558,.1808;6.4583,5.1001,.7325;6.5616,3.0681,.0809;7.501,5.1135,1.062;4.3407,6.2308,.5055;5.6594,6.2585,.8852;3.7057,7.1115,.6402;6.0902,7.1652,1.319;-2.3393,-3.9489,-2.8755;-2.5243,-4.9824,-2.5448;-3.2084,-3.6274,-3.4801;-1.461,-3.9479,-3.5404;-1.6863,-1.6094,-2.105;-2.4218,-1.1371,-2.781;-1.5219,-.9448,-1.2423;-.7363,-1.6553,-2.6611;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662921640698</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001135934813 0.000136333966 0.023830058717 0.005352124163</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057114204 -0.000276806 0.000028389 0.000149303 0.000354232 0.000384329 0.000449208 0.000520835 0.000646348 0.000802564 0.000892192 0.001019518 0.001169717 0.001241458 0.001395514 0.001436998 0.001552710 0.001813646 0.002108062 0.002298330 0.002554895 0.002749844 0.002870575 0.003490527 0.003588341 0.003882765 0.004389753 0.004666046 0.004891581 0.005078461 0.005187900 0.005325159 0.006086166 0.006392021 0.006631300 0.006977185 0.007221391 0.007595416 0.008169598 0.008708566 0.008879434 0.009536554 0.009820057 0.010196540 0.010951690 0.011194663 0.011828336 0.012536975 0.013333678 0.013688521 0.014026154 0.014629186 0.014993128 0.015463587 0.015850544 0.016613638 0.017088570 0.018580707 0.018968525 0.019454356 0.020359658 0.020623006 0.021538220 0.021876366 0.022465866 0.022783443 0.023483552 0.023825986 0.024517437 0.025882218 0.026592400 0.026887203 0.027237302 0.027563878 0.028200729 0.029082997 0.030899449 0.031516993 0.032208911 0.034093114 0.034657197 0.036020472 0.039050084 0.039532105 0.041974115 0.045404540 0.046149911 0.046898492 0.048862113 0.049692151 0.049898351 0.050819159 0.051536671 0.052183963 0.052288391 0.052411132 0.052778861 0.053565613 0.054925236 0.056088753 0.056419448 0.056716797 0.057012431 0.057284983 0.057767603 0.058589030 0.059238168 0.059726778 0.061344628 0.062043383 0.062905696 0.064232569 0.064563695 0.065050255 0.066008375 0.067487119 0.067960386 0.068960582 0.070516385 0.072146365 0.072632823 0.072902613 0.073426076 0.075289543 0.078678005 0.080851830 0.081665135 0.083350573 0.084574719 0.087913270 0.089004156 0.089392344 0.089833848 0.091306384 0.093314676 0.094581145 0.095490335 0.096191093 0.096858453 0.098491342 0.100145837 0.100691841 0.102673746 0.103713160 0.104192167 0.106455691 0.108906446 0.110883079 0.112273334 0.112804402 0.113820596 0.114758106 0.116943901 0.117173687 0.118625307 0.119307025 0.120582935 0.122278988 0.125172184 0.125774860 0.128504881 0.129006750 0.130985117 0.133657188 0.136362542 0.137733777 0.138645867 0.139629782 0.140530423 0.143525306 0.144692137 0.145918064 0.146785429 0.151985762 0.153628483 0.154287834 0.160811248 0.161341010 0.168537153 0.171457049 0.175970260 0.179094069 0.181609737 0.184427166 0.189095990 0.189846554 0.191856435 0.201298867 0.202216192 0.206292558 0.206961462 0.207266466 0.212347618 0.212578164 0.215530099 0.217027602 0.220357432 0.221019077 0.224545103 0.224774699 0.226130171 0.231853444 0.234543110 0.235528429 0.238551992 0.246453199 0.249288417 0.251934007 0.256554393 0.257211848 0.258273776 0.262555432 0.271575380 0.282896200 0.292018362 0.299969127 0.300148409 0.301040372 0.307120493 0.307783278 0.309842122 0.320021893 0.321359668 0.326444835 0.330118853 0.336556038 0.347757874 0.352024547 0.355645576 0.360758143 0.361624429 0.364126716 0.384515459 0.407008350 0.414434175 0.430267187 0.432173755 0.435269891 0.450866756 0.464647832 0.475623279 0.478828019 0.480387627 0.486648867 0.498898154 0.503932507 0.515151006 0.517909327 0.543785275 0.566926144 0.567683761 0.586582758 0.592184636 0.605740790 0.644240388 0.645394022 0.668017879 0.675665100 0.687374795 0.703907766 0.704358869 0.705962240 0.709643398 0.717212367 0.734023345 0.738008504 0.739753555 0.747578962 0.750790930 0.771611236 0.775983183 0.808979274 0.821825752 0.824061177 0.828931308 0.834265353 0.847159945 0.849431195 0.851395532 0.854533994 0.863303501 0.867471205 0.875875182 0.887463168 0.891110211 0.892446342 0.893544169 0.902059755 0.910276124 0.918093354 0.923796411 0.924612147 0.931991813 0.935679650 0.956014183 0.962928877 0.965216300 0.970110407 0.978191258 0.982576930 0.998643050 1.012989239 1.015961997 1.021852294 1.040195154 1.055087071 1.071030606 1.072605195 1.079476371 1.087365648 1.108358409 1.110420319 1.117122661 1.118885500 1.122606362 1.123861315 1.141865190 1.148927207 1.161759786 1.170174482 1.177215521 1.187270569 1.200758016 1.221802457 1.233944169 1.258137013 1.296466939 1.298295913 1.314728424 1.326480563 1.327518751 1.330225388 1.331390572 1.334794212 1.342273126 1.348840550 1.365824083 1.380001921 1.381321454 1.381828881 1.429429826 1.517261548 1.557989648 1.684737906 1.922997464</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">234</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91363263" y3="-0.95506498" z3="-0.6843645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.58968591" y3="-1.95295295" z3="-1.5628902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0733697" y3="-0.99826726" z3="-1.42321607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76832463" y3="1.47640183" z3="-1.07150979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28461227" y3="0.31155792" z3="-0.5009321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64967004" y3="2.73938533" z3="-1.14423143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00166603" y3="2.73563726" z3="-0.84968364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38262333" y3="4.998378" z3="-0.37008776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80677447" y3="3.85634464" z3="-0.87460124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7593467" y3="5.87552035" z3="-0.17057157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07771804" y3="1.61392033" z3="-1.66247898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13030044" y3="0.36141817" z3="0.22598512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70991807" y3="0.38586514" z3="-0.62068651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61205707" y3="0.73324672" z3="0.31589507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65464614" y3="-0.85453467" z3="-1.48452565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09670195" y3="-2.47454386" z3="-1.3100395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.06885657" y3="-5.4885098" z3="-6.25514954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79322781" y3="-5.05483523" z3="-5.28964541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07161082" y3="-3.91611814" z3="-2.83815036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75829395" y3="-3.67449556" z3="-5.14166046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.49565431" y3="-5.8824434" z3="-4.20407111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14944986" y3="-5.30692855" z3="-2.98806186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40650147" y3="-3.07331333" z3="-3.92256265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.99722338" y3="-3.00642634" z3="-5.97279891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54710676" y3="-6.97011068" z3="-4.2980515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95546034" y3="-5.94083765" z3="-2.11860764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6602016" y3="-3.3695104" z3="-1.59582102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34271292" y3="-3.85435022" z3="-0.8556669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68278553" y3="-4.85725686" z3="-1.12691663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38577208" y3="-3.55392235" z3="0.59300096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43283685" y3="-3.08291858" z3="3.35207411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69895" y3="-4.58985681" z3="1.48168282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11567312" y3="-2.27780834" z3="1.09712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13557542" y3="-2.0448858" z3="2.46798954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7139349" y3="-4.35644392" z3="2.85557572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88812952" y3="-5.59806475" z3="1.09964083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0981087" y3="-1.43721921" z3="0.43608072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09020335" y3="-1.03777411" z3="2.82941118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92469556" y3="-5.18146553" z3="3.54080021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43802366" y3="-2.90343815" z3="4.43112915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35934737" y3="-1.73752608" z3="-3.89273863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48063766" y3="-1.33139947" z3="-2.98872148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33535818" y3="3.71829658" z3="-1.02426707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12581323" y3="-2.99016197" z3="-1.71679986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91850728" y3="-3.1639904" z3="-0.57801766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1134928" y3="-2.28687536" z3="0.3514599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83819599" y3="-0.72022991" z3="0.60638462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6846391" y3="-0.23989965" z3="-0.98554202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53016374" y3="0.44636814" z3="1.2113098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09312431" y3="-1.06086913" z3="1.95227859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40633182" y3="-4.37343338" z3="-0.34360395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12911297" y3="-4.60989541" z3="0.85508953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.9775091" y3="0.0755583" z3="-1.76841991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35907321" y3="0.6149109" z3="-0.79650322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29429355" y3="-1.07067415" z3="-1.38467729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64104089" y3="0.55669224" z3="0.56349222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1674154" y3="0.12726484" z3="2.20405616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99757147" y3="1.44189402" z3="1.32454497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55410552" y3="-0.11307348" z3="2.28427198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90511451" y3="-1.72438898" z3="1.60656598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61167036" y3="-1.52743495" z3="2.83026323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06396084" y3="-4.02585057" z3="0.86720522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52093607" y3="-4.35638886" z3="1.73690515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36255251" y3="-5.68266687" z3="0.84911273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27861877" y3="-2.19606421" z3="-0.16879041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13747734" y3="-3.29795745" z3="-1.02479559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49534024" y3="-4.45601052" z3="-0.60309134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99797685" y3="-4.50685857" z3="0.69352614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14573113" y3="-3.44430353" z3="1.58022295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77992832" y3="-2.28930426" z3="1.14044825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49329436" y3="-3.23098392" z3="-2.05616479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35561453" y3="-5.30012641" z3="-1.2791921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25971477" y3="-5.69354558" z3="1.12786866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73908748" y3="-3.52146305" z3="2.5896414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87318595" y3="-1.43905214" z3="1.81736886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48741358" y3="4.01959211" z3="0.06936796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85935841" y3="3.81166208" z3="0.01167774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40568618" y3="3.30126853" z3="-1.16058898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62201037" y3="3.02291689" z3="-2.27775304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25042127" y3="3.22851978" z3="-2.20058337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0358883" y3="4.3769179" z3="0.99760845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50241967" y3="4.01678211" z3="0.86849343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84255378" y3="3.01947932" z3="-1.21234115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0880704" y3="2.63612203" z3="-3.18479998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37799383" y3="2.98616788" z3="-3.05894434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16335187" y3="-5.89992387" z3="2.31656142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76786678" y3="-6.39950876" z3="0.26640658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33228435" y3="2.75609516" z3="-2.28948586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46412027" y3="3.04674626" z3="-0.16667079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.60855134" y3="0.16024407" z3="-2.04331908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93476919" y3="1.40791335" z3="-1.9013123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78070555" y3="0.08627339" z3="-2.84555539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25173473" y3="1.19169237" z3="-3.50942567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29464714" y3="-0.87572766" z3="-2.93495687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15050161" y3="1.1224138" z3="-4.12847466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43102365" y3="2.52669556" z3="-2.62755206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55773571" y3="2.42137866" z3="-3.40728042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90064699" y3="3.47928277" z3="-2.56827021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9175333" y3="3.29429824" z3="-3.95926658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58199741" y3="3.90656176" z3="-0.25934467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76649598" y3="5.05929366" z3="-0.06147816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93526664" y3="3.9591062" z3="0.17900945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45872292" y3="5.10503633" z3="0.72801999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56280148" y3="3.07111221" z3="0.08199839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50124839" y3="5.11929554" z3="1.05839739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34066654" y3="6.2350059" z3="0.49638358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65941754" y3="6.2639433" z3="0.87688102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70531086" y3="7.11649687" z3="0.62895608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08960691" y3="7.17197924" z3="1.30850071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33879734" y3="-3.93913503" z3="-2.87935529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5222499" y3="-4.97426585" z3="-2.55302652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20883518" y3="-3.61659401" z3="-3.48232116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4607173" y3="-3.93415728" z3="-3.5444759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68523736" y3="-1.60315466" z3="-2.09961021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41997764" y3="-1.12768903" z3="-2.77464396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52140421" y3="-0.94175436" z3="-1.23417807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73503265" y3="-1.64765125" z3="-2.65538028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9136,-.9551,-.6844;6.5897,-1.953,-1.5629;6.0734,-.9983,-1.4232;4.7683,1.4764,-1.0715;4.2846,.3116,-.5009;2.6497,2.7394,-1.1442;4.0017,2.7356,-.8497;2.3826,4.9984,-.3701;1.8068,3.8563,-.8746;1.7593,5.8755,-.1706;2.0777,1.6139,-1.6625;3.1303,.3614,.226;1.7099,.3859,-.6207;.6121,.7332,.3159;1.6546,-.8545,-1.4845;1.0967,-2.4745,-1.31;2.0689,-5.4885,-6.2551;1.7932,-5.0548,-5.2896;1.0716,-3.9161,-2.8382;1.7583,-3.6745,-5.1417;1.4957,-5.8824,-4.2041;1.1494,-5.3069,-2.9881;1.4065,-3.0733,-3.9226;1.9972,-3.0064,-5.9728;1.5471,-6.9701,-4.2981;.9555,-5.9408,-2.1186;.6602,-3.3695,-1.5958;-.3427,-3.8544,-.8557;-.6828,-4.8573,-1.1269;-.3858,-3.5539,.593;-.4328,-3.0829,3.3521;-.6989,-4.5899,1.4817;-.1157,-2.2778,1.0971;-.1356,-2.0449,2.468;-.7139,-4.3564,2.8556;-.8881,-5.5981,1.0996;.0981,-1.4372,.4361;.0902,-1.0378,2.8294;-.9247,-5.1815,3.5408;-.438,-2.9034,4.4311;1.3593,-1.7375,-3.8927;1.4806,-1.3314,-2.9887;.3354,3.7183,-1.0243;-2.1258,-2.9902,-1.7168;-2.9185,-3.164,-.578;-3.1135,-2.2869,.3515;-3.8382,-.7202,.6064;-4.6846,-.2399,-.9855;-2.5302,.4464,1.2113;-5.0931,-1.0609,1.9523;-3.4063,-4.3734,-.3436;-4.1291,-4.6099,.8551;-3.9775,.0756,-1.7684;-5.3591,.6149,-.7965;-5.2943,-1.0707,-1.3847;-1.641,.5567,.5635;-2.1674,.1273,2.2041;-2.9976,1.4419,1.3245;-5.5541,-.1131,2.2843;-5.9051,-1.7244,1.6066;-4.6117,-1.5274,2.8303;-5.064,-4.0259,.8672;-3.5209,-4.3564,1.7369;-4.3626,-5.6827,.8491;4.2786,-2.1961,-.1688;4.1375,-3.298,-1.0248;3.4953,-4.456,-.6031;2.998,-4.5069,.6935;3.1457,-3.4443,1.5802;3.7799,-2.2893,1.1404;4.4933,-3.231,-2.0562;3.3556,-5.3001,-1.2792;2.2597,-5.6935,1.1279;2.7391,-3.5215,2.5896;3.8732,-1.4391,1.8174;-.4874,4.0196,.0694;-1.8594,3.8117,.0117;-2.4057,3.3013,-1.1606;-1.622,3.0229,-2.2778;-.2504,3.2285,-2.2006;-.0359,4.3769,.9976;-2.5024,4.0168,.8685;-3.8426,3.0195,-1.2123;-2.0881,2.6361,-3.1848;.378,2.9862,-3.0589;2.1634,-5.8999,2.3166;1.7679,-6.3995,.2664;-4.3323,2.7561,-2.2895;-4.4641,3.0467,-.1667;6.6086,.1602,-2.0433;5.9348,1.4079,-1.9013;7.7807,.0863,-2.8456;8.2517,1.1917,-3.5094;8.2946,-.8757,-2.935;9.1505,1.1224,-4.1285;6.431,2.5267,-2.6276;7.5577,2.4214,-3.4073;5.9006,3.4793,-2.5683;7.9175,3.2943,-3.9593;4.582,3.9066,-.2593;3.7665,5.0593,-.0615;5.9353,3.9591,.179;6.4587,5.105,.728;6.5628,3.0711,.082;7.5012,5.1193,1.0584;4.3407,6.235,.4964;5.6594,6.2639,.8769;3.7053,7.1165,.629;6.0896,7.172,1.3085;-2.3388,-3.9391,-2.8794;-2.5222,-4.9743,-2.553;-3.2088,-3.6166,-3.4823;-1.4607,-3.9342,-3.5445;-1.6852,-1.6032,-2.0996;-2.42,-1.1277,-2.7746;-1.5214,-.9418,-1.2342;-.735,-1.6477,-2.6554;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662922874353</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001121531158 0.000147107659 0.020091626070 0.005596682008</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057116696 -0.000159558 0.000032671 0.000228901 0.000357229 0.000385441 0.000450095 0.000522935 0.000646464 0.000801191 0.000903987 0.001018963 0.001169784 0.001241041 0.001393965 0.001437593 0.001555311 0.001810054 0.002108935 0.002298369 0.002554667 0.002751162 0.002870430 0.003489605 0.003587384 0.003880069 0.004389145 0.004665696 0.004892878 0.005077232 0.005187221 0.005325817 0.006089602 0.006395173 0.006631416 0.006977447 0.007221915 0.007598564 0.008170114 0.008709905 0.008879072 0.009537425 0.009820539 0.010194855 0.010951278 0.011195430 0.011829354 0.012537180 0.013332373 0.013689527 0.014026432 0.014629576 0.014993242 0.015464698 0.015851397 0.016614609 0.017088313 0.018583328 0.018974422 0.019455436 0.020359812 0.020625692 0.021543015 0.021877465 0.022466116 0.022783895 0.023488571 0.023828040 0.024517935 0.025882689 0.026592343 0.026887340 0.027237130 0.027567469 0.028201222 0.029085967 0.030899427 0.031517745 0.032210311 0.034095225 0.034657284 0.036021522 0.039050800 0.039532429 0.041974304 0.045405649 0.046150322 0.046903611 0.048862870 0.049692538 0.049901623 0.050820579 0.051536766 0.052183913 0.052288421 0.052411547 0.052780879 0.053566837 0.054925638 0.056089386 0.056419965 0.056718411 0.057012623 0.057285785 0.057767939 0.058589433 0.059238223 0.059726507 0.061352632 0.062043400 0.062909945 0.064232656 0.064563788 0.065050737 0.066009275 0.067494814 0.067960358 0.068961173 0.070516423 0.072151724 0.072633060 0.072902709 0.073426949 0.075296048 0.078685563 0.080853976 0.081674368 0.083350564 0.084574849 0.087915157 0.089006319 0.089393992 0.089835584 0.091306497 0.093314666 0.094581369 0.095490452 0.096190980 0.096859510 0.098493729 0.100145999 0.100692827 0.102674221 0.103713977 0.104195611 0.106457365 0.108926253 0.110885484 0.112274640 0.112806594 0.113827121 0.114758004 0.116944662 0.117174053 0.118629782 0.119307215 0.120584473 0.122288505 0.125173107 0.125775173 0.128505482 0.129007152 0.130985513 0.133658806 0.136364442 0.137733959 0.138646738 0.139630054 0.140537728 0.143526191 0.144695325 0.145919191 0.146785715 0.151988118 0.153630014 0.154288256 0.160817316 0.161341708 0.168537615 0.171458201 0.175971003 0.179094054 0.181610839 0.184428153 0.189096364 0.189850895 0.191864037 0.201299176 0.202216954 0.206292902 0.206962044 0.207266556 0.212348973 0.212578296 0.215532910 0.217028840 0.220362642 0.221019476 0.224546675 0.224807494 0.226173000 0.231853570 0.234543738 0.235528495 0.238552133 0.246455326 0.249291743 0.251935059 0.256554688 0.257213517 0.258275169 0.262556591 0.271575735 0.282899036 0.292018522 0.299969683 0.300158379 0.301045852 0.307121756 0.307783728 0.309842534 0.320032923 0.321361114 0.326450906 0.330122075 0.336580287 0.347758254 0.352024579 0.355648399 0.360780964 0.361626394 0.364129809 0.384516016 0.407012060 0.414436717 0.430269112 0.432174892 0.435271609 0.450871812 0.464648446 0.475625763 0.478829797 0.480392174 0.486654660 0.498898247 0.503932998 0.515152247 0.517919664 0.543787214 0.566926296 0.567683780 0.586589528 0.592187093 0.605741908 0.644241096 0.645394758 0.668022443 0.675667858 0.687374816 0.703913443 0.704358897 0.705962912 0.709672518 0.717213754 0.734030862 0.738008973 0.739756011 0.747581849 0.750791836 0.771611397 0.775983347 0.808989793 0.821826370 0.824064207 0.828931857 0.834270551 0.847163404 0.849434387 0.851398063 0.854536407 0.863304125 0.867471388 0.875880076 0.887467658 0.891118476 0.892446931 0.893547897 0.902068568 0.910278060 0.918094406 0.923841415 0.924625653 0.931994542 0.935682047 0.956016445 0.962956005 0.965216571 0.970111339 0.978219506 0.982577100 0.998643209 1.012989952 1.015979219 1.021857892 1.040195422 1.055088005 1.071056060 1.072613338 1.079476657 1.087367524 1.108376323 1.110421793 1.117254677 1.118907904 1.122608523 1.123868348 1.141865392 1.148938056 1.161760984 1.170175338 1.177218503 1.187270918 1.200758413 1.221814697 1.233949478 1.258138728 1.296467069 1.298303801 1.314729217 1.326481431 1.327534588 1.330227546 1.331391348 1.334794240 1.342273653 1.348843441 1.365893846 1.380002153 1.381321559 1.381829849 1.429481702 1.517285240 1.557992545 1.684738946 1.923001849</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">235</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91634805" y3="-0.95439541" z3="-0.67990608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59225098" y3="-1.95367051" z3="-1.55694774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07599411" y3="-0.9987676" z3="-1.4187389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77072617" y3="1.47639742" z3="-1.071278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28760147" y3="0.31258349" z3="-0.49800756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65160131" y3="2.73865424" z3="-1.14440589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00395563" y3="2.73599018" z3="-0.85153605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38476678" y3="4.99949134" z3="-0.37584932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80868833" y3="3.85595802" z3="-0.87660538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7614091" y3="5.87688562" z3="-0.17756788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.07914172" y3="1.61200183" z3="-1.65934486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13420781" y3="0.36373729" z3="0.23027135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71261861" y3="0.38616916" z3="-0.61457847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61556865" y3="0.73496303" z3="0.32226419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65684841" y3="-0.85576405" z3="-1.47617712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0963293" y3="-2.47451073" z3="-1.30587407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0805504" y3="-5.48008597" z3="-6.2531462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.8017448" y3="-5.04786293" z3="-5.28786221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07253639" y3="-3.91281036" z3="-2.83684447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76653476" y3="-3.66775048" z3="-5.13787194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.50039883" y3="-5.87705184" z3="-4.2045475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.15040777" y3="-5.30340658" z3="-2.98861182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.41077501" y3="-3.06844671" z3="-3.91900843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00823843" y3="-2.99844077" z3="-5.96720487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.55178104" y3="-6.96452412" z3="-4.30024527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95351831" y3="-5.93864972" z3="-2.12081263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65804855" y3="-3.36689896" z3="-1.59517662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34633557" y3="-3.85269616" z3="-0.85689951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68670788" y3="-4.85484998" z3="-1.13034821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3911382" y3="-3.55463104" z3="0.59210963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4408693" y3="-3.08866922" z3="3.35203265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70815687" y3="-4.59117147" z3="1.4787796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11876844" y3="-2.28022224" z3="1.0985265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1406953" y3="-2.04938276" z3="2.46972032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72435546" y3="-4.36044117" z3="2.8531286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90118813" y3="-5.59616084" z3="1.09401629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0980701" y3="-1.43918939" z3="0.43872482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08699985" y3="-1.04381883" z3="2.83317855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93701066" y3="-5.18642982" z3="3.53744196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.44655849" y3="-2.9116083" z3="4.43153466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36315665" y3="-1.73279036" z3="-3.88686825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48415827" y3="-1.32866519" z3="-2.98206562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33708151" y3="3.71653373" z3="-1.02402006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12635872" y3="-2.985224" z3="-1.71867257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9215033" y3="-3.16467363" z3="-0.58269046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11824347" y3="-2.29267445" z3="0.35112422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84133047" y3="-0.72521348" z3="0.61066785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69472158" y3="-0.24497401" z3="-0.97730383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5320035" y3="0.44173493" z3="1.21250126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08940496" y3="-1.06855106" z3="1.96185781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40930071" y3="-4.37574459" z3="-0.35458804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13650638" y3="-4.6165073" z3="0.84069283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99066704" y3="0.06592384" z3="-1.76513861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36565709" y3="0.61249584" z3="-0.78719688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30856246" y3="-1.07510865" z3="-1.37142378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64384194" y3="0.55205967" z3="0.56404967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16829431" y3="0.12315564" z3="2.20485904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99951591" y3="1.43766854" z3="1.32551405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54860188" y3="-0.12119922" z3="2.29811939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90338521" y3="-1.73129889" z3="1.61843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60353773" y3="-1.53726147" z3="2.83592059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07121027" y3="-4.03244498" z3="0.85105741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53164969" y3="-4.36505637" z3="1.72590792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36950797" y3="-5.68972532" z3="0.83045466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28041151" y3="-2.19480618" z3="-0.16401708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13834197" y3="-3.29638875" z3="-1.02023017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49388437" y3="-4.45330658" z3="-0.59927079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99528023" y3="-4.5035417" z3="0.69688655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14440719" y3="-3.44166066" z3="1.58396732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78079752" y3="-2.28756722" z3="1.14487825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49487795" y3="-3.22972192" z3="-2.05136719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3527917" y3="-5.29644452" z3="-1.27579765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25412958" y3="-5.6886524" z3="1.130232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73680305" y3="-3.51840264" z3="2.59301813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8745928" y3="-1.43731174" z3="1.82187831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48461687" y3="4.01674561" z3="0.07038723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85609577" y3="3.80633201" z3="0.0152812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40364044" y3="3.29639209" z3="-1.15717259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62099744" y3="3.01910404" z3="-2.27516419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24960551" y3="3.2262606" z3="-2.19949552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03169197" y3="4.37298304" z3="0.99926965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.49864809" y3="4.0111507" z3="0.87174639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84029066" y3="3.01323476" z3="-1.20717523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08783194" y3="2.63210526" z3="-3.18159842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37787513" y3="2.98549869" z3="-3.05966597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15642849" y3="-5.89514346" z3="2.31891149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76161757" y3="-6.39331369" z3="0.26806409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.330886" y3="2.74861548" z3="-2.28355953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46093864" y3="3.04089521" z3="-0.1609773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61093427" y3="0.15866347" z3="-2.04098239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93675892" y3="1.40638908" z3="-1.90159874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78303772" y3="0.08327009" z3="-2.84310725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25370492" y3="1.18735515" z3="-3.50940981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.29720675" y3="-0.8788007" z3="-2.9304079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15247572" y3="1.11701494" z3="-4.12829008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43249204" y3="2.52360204" z3="-2.63063634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.55921382" y3="2.41697086" z3="-3.41007734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9018075" y3="3.47609679" z3="-2.5737008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.91865853" y3="3.28879491" z3="-3.96401315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58476716" y3="3.90884066" z3="-0.26536595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76914584" y3="5.06171096" z3="-0.06970084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93885752" y3="3.96358049" z3="0.17019142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.46281914" y3="5.11158495" z3="0.7142328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56680844" y3="3.07573135" z3="0.07454566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50617888" y3="5.12762076" z3="1.04193537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.34379765" y3="6.23943727" z3="0.48321673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.66318808" y3="6.27047705" z3="0.86092571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70830699" y3="7.12065987" z3="0.61308632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.09390554" y3="7.18016897" z3="1.28840909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3362028" y3="-3.92912058" z3="-2.8861606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5188553" y3="-4.9660802" z3="-2.5652281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20542612" y3="-3.60432198" z3="-3.48864912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45703347" y3="-3.91992728" z3="-3.54985469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68581913" y3="-1.59619348" z3="-2.0945526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41957805" y3="-1.11857556" z3="-2.76879105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52381139" y3="-0.93831743" z3="-1.22635758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73413987" y3="-1.63800489" z3="-2.64824771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9163,-.9544,-.6799;6.5923,-1.9537,-1.5569;6.076,-.9988,-1.4187;4.7707,1.4764,-1.0713;4.2876,.3126,-.498;2.6516,2.7387,-1.1444;4.004,2.736,-.8515;2.3848,4.9995,-.3758;1.8087,3.856,-.8766;1.7614,5.8769,-.1776;2.0791,1.612,-1.6593;3.1342,.3637,.2303;1.7126,.3862,-.6146;.6156,.735,.3223;1.6568,-.8558,-1.4762;1.0963,-2.4745,-1.3059;2.0806,-5.4801,-6.2531;1.8017,-5.0479,-5.2879;1.0725,-3.9128,-2.8368;1.7665,-3.6678,-5.1379;1.5004,-5.8771,-4.2045;1.1504,-5.3034,-2.9886;1.4108,-3.0684,-3.919;2.0082,-2.9984,-5.9672;1.5518,-6.9645,-4.3002;.9535,-5.9386,-2.1208;.658,-3.3669,-1.5952;-.3463,-3.8527,-.8569;-.6867,-4.8548,-1.1303;-.3911,-3.5546,.5921;-.4409,-3.0887,3.352;-.7082,-4.5912,1.4788;-.1188,-2.2802,1.0985;-.1407,-2.0494,2.4697;-.7244,-4.3604,2.8531;-.9012,-5.5962,1.094;.0981,-1.4392,.4387;.087,-1.0438,2.8332;-.937,-5.1864,3.5374;-.4466,-2.9116,4.4315;1.3632,-1.7328,-3.8869;1.4842,-1.3287,-2.9821;.3371,3.7165,-1.024;-2.1264,-2.9852,-1.7187;-2.9215,-3.1647,-.5827;-3.1182,-2.2927,.3511;-3.8413,-.7252,.6107;-4.6947,-.245,-.9773;-2.532,.4417,1.2125;-5.0894,-1.0686,1.9619;-3.4093,-4.3757,-.3546;-4.1365,-4.6165,.8407;-3.9907,.0659,-1.7651;-5.3657,.6125,-.7872;-5.3086,-1.0751,-1.3714;-1.6438,.5521,.564;-2.1683,.1232,2.2049;-2.9995,1.4377,1.3255;-5.5486,-.1212,2.2981;-5.9034,-1.7313,1.6184;-4.6035,-1.5373,2.8359;-5.0712,-4.0324,.8511;-3.5316,-4.3651,1.7259;-4.3695,-5.6897,.8305;4.2804,-2.1948,-.164;4.1383,-3.2964,-1.0202;3.4939,-4.4533,-.5993;2.9953,-4.5035,.6969;3.1444,-3.4417,1.584;3.7808,-2.2876,1.1449;4.4949,-3.2297,-2.0514;3.3528,-5.2964,-1.2758;2.2541,-5.6887,1.1302;2.7368,-3.5184,2.593;3.8746,-1.4373,1.8219;-.4846,4.0167,.0704;-1.8561,3.8063,.0153;-2.4036,3.2964,-1.1572;-1.621,3.0191,-2.2752;-.2496,3.2263,-2.1995;-.0317,4.373,.9993;-2.4986,4.0112,.8717;-3.8403,3.0132,-1.2072;-2.0878,2.6321,-3.1816;.3779,2.9855,-3.0597;2.1564,-5.8951,2.3189;1.7616,-6.3933,.2681;-4.3309,2.7486,-2.2836;-4.4609,3.0409,-.161;6.6109,.1587,-2.041;5.9368,1.4064,-1.9016;7.783,.0833,-2.8431;8.2537,1.1874,-3.5094;8.2972,-.8788,-2.9304;9.1525,1.117,-4.1283;6.4325,2.5236,-2.6306;7.5592,2.417,-3.4101;5.9018,3.4761,-2.5737;7.9187,3.2888,-3.964;4.5848,3.9088,-.2654;3.7691,5.0617,-.0697;5.9389,3.9636,.1702;6.4628,5.1116,.7142;6.5668,3.0757,.0745;7.5062,5.1276,1.0419;4.3438,6.2394,.4832;5.6632,6.2705,.8609;3.7083,7.1207,.6131;6.0939,7.1802,1.2884;-2.3362,-3.9291,-2.8862;-2.5189,-4.9661,-2.5652;-3.2054,-3.6043,-3.4886;-1.457,-3.9199,-3.5499;-1.6858,-1.5962,-2.0946;-2.4196,-1.1186,-2.7688;-1.5238,-.9383,-1.2264;-.7341,-1.638,-2.6482;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662921127918</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001147676986 0.000151588819 0.026185913206 0.005362192145</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057116866 -0.000160716 0.000029833 0.000170988 0.000353810 0.000384066 0.000457006 0.000521000 0.000646510 0.000801346 0.000917008 0.001016209 0.001169521 0.001241913 0.001389002 0.001437422 0.001562328 0.001808767 0.002108817 0.002301990 0.002554512 0.002752139 0.002871053 0.003493883 0.003587874 0.003879790 0.004389665 0.004663841 0.004891392 0.005080847 0.005189044 0.005328373 0.006097500 0.006403684 0.006630189 0.006978198 0.007222656 0.007598735 0.008171730 0.008710560 0.008881266 0.009542386 0.009824998 0.010194524 0.010965965 0.011194927 0.011837854 0.012539546 0.013332873 0.013693433 0.014026776 0.014629614 0.014993464 0.015465763 0.015853718 0.016614198 0.017087134 0.018590816 0.018977528 0.019455369 0.020358522 0.020628620 0.021545588 0.021879341 0.022465524 0.022783345 0.023491503 0.023824962 0.024518035 0.025882663 0.026592658 0.026886592 0.027235705 0.027562475 0.028201534 0.029086837 0.030899137 0.031518388 0.032194586 0.034096556 0.034657464 0.036021000 0.039050587 0.039532832 0.041974444 0.045405636 0.046151261 0.046902343 0.048862205 0.049692735 0.049902511 0.050820579 0.051536756 0.052184120 0.052288427 0.052411802 0.052785354 0.053567346 0.054926302 0.056089893 0.056420052 0.056719337 0.057013121 0.057285196 0.057768091 0.058589600 0.059237475 0.059727251 0.061353984 0.062043289 0.062910860 0.064232598 0.064563765 0.065051885 0.066009651 0.067497978 0.067960831 0.068959379 0.070515554 0.072152380 0.072632919 0.072902814 0.073428717 0.075289048 0.078691945 0.080853948 0.081680738 0.083350972 0.084573122 0.087913874 0.089007352 0.089394658 0.089836450 0.091306106 0.093314456 0.094581437 0.095490399 0.096188029 0.096860063 0.098497720 0.100143985 0.100694092 0.102677300 0.103722676 0.104195253 0.106459729 0.108938395 0.110887837 0.112273565 0.112809029 0.113830996 0.114760189 0.116944231 0.117176126 0.118631734 0.119306852 0.120585374 0.122292500 0.125173604 0.125776320 0.128505505 0.129009329 0.130986782 0.133659898 0.136365287 0.137736901 0.138647172 0.139629885 0.140539912 0.143520413 0.144697940 0.145921803 0.146786645 0.151986495 0.153630184 0.154288950 0.160816920 0.161345137 0.168537515 0.171458127 0.175971588 0.179092925 0.181610823 0.184425560 0.189095162 0.189853185 0.191866708 0.201297769 0.202217175 0.206292902 0.206962326 0.207266347 0.212349764 0.212577740 0.215540108 0.217022567 0.220370789 0.221019329 0.224547851 0.224839495 0.226219539 0.231853561 0.234543938 0.235527643 0.238552881 0.246451543 0.249267762 0.251930467 0.256553288 0.257214706 0.258276234 0.262557868 0.271576057 0.282900629 0.292018677 0.299968880 0.300161213 0.301047849 0.307122023 0.307783782 0.309843971 0.320031935 0.321361512 0.326451583 0.330127011 0.336591321 0.347758806 0.352024545 0.355649284 0.360789907 0.361629150 0.364131672 0.384516515 0.407014778 0.414438519 0.430269675 0.432170704 0.435272017 0.450874700 0.464648474 0.475623603 0.478830749 0.480394753 0.486654191 0.498898291 0.503933379 0.515155621 0.517922101 0.543787361 0.566926288 0.567683849 0.586593765 0.592183863 0.605740760 0.644242109 0.645395169 0.668022721 0.675669769 0.687374351 0.703917849 0.704358927 0.705960809 0.709685396 0.717213978 0.734031754 0.738009053 0.739755735 0.747583911 0.750792147 0.771611476 0.775983467 0.808991359 0.821826431 0.824065407 0.828932054 0.834272330 0.847167292 0.849435416 0.851398379 0.854536851 0.863304176 0.867471485 0.875882019 0.887471928 0.891125698 0.892449580 0.893550849 0.902070757 0.910277888 0.918094636 0.923861811 0.924630591 0.931995777 0.935682532 0.956015621 0.962964508 0.965217194 0.970111251 0.978226072 0.982578016 0.998643284 1.012991628 1.015990906 1.021858492 1.040195895 1.055088103 1.071071647 1.072616811 1.079476930 1.087368932 1.108384959 1.110422001 1.117318727 1.118919645 1.122610011 1.123872580 1.141865624 1.148944496 1.161761262 1.170175804 1.177220081 1.187271209 1.200758542 1.221817717 1.233953855 1.258139602 1.296467507 1.298306065 1.314729308 1.326481778 1.327534126 1.330226849 1.331391488 1.334794247 1.342271179 1.348848149 1.365936679 1.380002368 1.381323211 1.381830356 1.429499740 1.517283397 1.557993492 1.684739174 1.923001243</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">236</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91955834" y3="-0.95423397" z3="-0.67864262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59559093" y3="-1.95323515" z3="-1.55605763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0794432" y3="-0.99831036" z3="-1.41721052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77365248" y3="1.47677596" z3="-1.06916009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29064958" y3="0.31266936" z3="-0.49644069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65347283" y3="2.73707833" z3="-1.14570899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00546114" y3="2.73580207" z3="-0.85095585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38358264" y3="4.99865303" z3="-0.38013586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80924811" y3="3.85410011" z3="-0.88058274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75918012" y3="5.87596612" z3="-0.1832945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08249193" y3="1.60947212" z3="-1.66009876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13673733" y3="0.363245" z3="0.23105173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71590543" y3="0.38395666" z3="-0.61481601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61798396" y3="0.73196822" z3="0.32136647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66171621" y3="-0.8581352" z3="-1.47632932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09672713" y3="-2.47449776" z3="-1.30649204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.07507078" y3="-5.47986115" z3="-6.25529523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.79736615" y3="-5.04759604" z3="-5.28970834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.07106064" y3="-3.91246844" z3="-2.83784064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.76358668" y3="-3.66745362" z3="-5.13935654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4960607" y3="-5.87679293" z3="-4.20635491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14755414" y3="-5.30307977" z3="-2.99004852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40932294" y3="-3.06811852" z3="-3.92004604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="2.00543972" y3="-2.99821853" z3="-5.96875006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.54648442" y3="-6.96434363" z3="-4.30221071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95077503" y3="-5.93823825" z3="-2.12210378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65797986" y3="-3.36737657" z3="-1.59540778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34780664" y3="-3.85132427" z3="-0.85834275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68971623" y3="-4.85279759" z3="-1.13275979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39217948" y3="-3.5552369" z3="0.59129893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.44703981" y3="-3.09282231" z3="3.3517224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.71187871" y3="-4.59283008" z3="1.4756014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11837938" y3="-2.28193104" z3="1.10054509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.14235233" y3="-2.05339477" z3="2.47213912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.73094835" y3="-4.36372232" z3="2.85010155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90367969" y3="-5.59875319" z3="1.08942148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10102512" y3="-1.43987671" z3="0.4431796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.08612829" y3="-1.0484159" z3="2.83795398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94709675" y3="-5.1901149" z3="3.53186212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.45571959" y3="-2.9164204" z3="4.43126631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.36307285" y3="-1.73233102" z3="-3.88752045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48603293" y3="-1.32890385" z3="-2.98255177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33813507" y3="3.7133725" z3="-1.03066483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12587321" y3="-2.97977278" z3="-1.71798209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92213208" y3="-3.16103688" z3="-0.58273745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11779362" y3="-2.29148564" z3="0.35347226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84070814" y3="-0.72565032" z3="0.61837059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70613882" y3="-0.24897119" z3="-0.96421763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52969038" y3="0.44532099" z3="1.20914248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07752123" y3="-1.07010736" z3="1.98011894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41261335" y3="-4.37136733" z3="-0.3591759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.14017369" y3="-4.6156693" z3="0.83505198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00753713" y3="0.05277796" z3="-1.76046578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36924284" y3="0.61402868" z3="-0.77219457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32959836" y3="-1.07740955" z3="-1.3469435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64633644" y3="0.55756328" z3="0.55412445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1570578" y3="0.12850076" z3="2.19910869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99907653" y3="1.43961105" z3="1.32561349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53465461" y3="-0.1233496" z3="2.32062045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89361837" y3="-1.73398932" z3="1.64461591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58294313" y3="-1.53792915" z3="2.85013602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07468803" y3="-4.03076742" z3="0.84744408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53511743" y3="-4.36887067" z3="1.72100953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37456449" y3="-5.68852589" z3="0.82088826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28283878" y3="-2.19464351" z3="-0.16363766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13940338" y3="-3.29543178" z3="-1.02072567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49377127" y3="-4.45216655" z3="-0.60056456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99529777" y3="-4.50286251" z3="0.69564342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14552317" y3="-3.44155378" z3="1.58347626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78321553" y3="-2.28778737" z3="1.14521916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49594232" y3="-3.22832108" z3="-2.05184516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35208211" y3="-5.29522981" z3="-1.27755635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25340372" y3="-5.68797851" z3="1.12841085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7379156" y3="-3.51865697" z3="2.59250134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87823321" y3="-1.43827831" z3="1.8228923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48587783" y3="4.01674453" z3="0.06181401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85734133" y3="3.80604091" z3="0.00375792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40180329" y3="3.29003756" z3="-1.16685664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61684665" y3="3.00905148" z3="-2.28248331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2460292" y3="3.21855544" z3="-2.20586708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03561484" y3="4.37816926" z3="0.98912656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50150034" y3="4.01317561" z3="0.85923433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83804759" y3="3.00521753" z3="-1.21841371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08154204" y3="2.61793265" z3="-3.18845272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38345929" y3="2.97433285" z3="-3.06268407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15427287" y3="-5.89421929" z3="2.31692309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76178452" y3="-6.39288391" z3="0.26592781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32580887" y3="2.73253451" z3="-2.29426501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46128675" y3="3.03979487" z3="-0.17382227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61468381" y3="0.159537" z3="-2.03848267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9403749" y3="1.40726716" z3="-1.89865144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78709974" y3="0.08452642" z3="-2.8403187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.25797849" y3="1.18894093" z3="-3.50592082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30134869" y3="-0.87752733" z3="-2.9280227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.15694273" y3="1.11884318" z3="-4.12465474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43644993" y3="2.52489398" z3="-2.62679659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56346109" y3="2.41858359" z3="-3.40603102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90577768" y3="3.4774649" z3="-2.56939689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.92309523" y3="3.29070233" z3="-3.95936533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58424208" y3="3.90970151" z3="-0.2649211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76737554" y3="5.06223011" z3="-0.071685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93725122" y3="3.96571475" z3="0.17348171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45922605" y3="5.11454072" z3="0.71791772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56576219" y3="3.07806855" z3="0.0799573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.50152138" y3="5.13154674" z3="1.04840515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3400903" y3="6.24090817" z3="0.48138582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65862795" y3="6.27309482" z3="0.86188333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70370605" y3="7.12212621" z3="0.61004597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08769805" y3="7.18347493" z3="1.28969195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.33709876" y3="-3.9197001" z3="-2.88823101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52187018" y3="-4.95711686" z3="-2.57044525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.20542676" y3="-3.59168358" z3="-3.49041257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.45765083" y3="-3.91043406" z3="-3.5515402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68321108" y3="-1.59047529" z3="-2.08984686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41618714" y3="-1.10935905" z3="-2.76270353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52051532" y3="-0.93555766" z3="-1.21942171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73215457" y3="-1.63234405" z3="-2.64433554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9196,-.9542,-.6786;6.5956,-1.9532,-1.5561;6.0794,-.9983,-1.4172;4.7737,1.4768,-1.0692;4.2906,.3127,-.4964;2.6535,2.7371,-1.1457;4.0055,2.7358,-.851;2.3836,4.9987,-.3801;1.8092,3.8541,-.8806;1.7592,5.876,-.1833;2.0825,1.6095,-1.6601;3.1367,.3632,.2311;1.7159,.384,-.6148;.618,.732,.3214;1.6617,-.8581,-1.4763;1.0967,-2.4745,-1.3065;2.0751,-5.4799,-6.2553;1.7974,-5.0476,-5.2897;1.0711,-3.9125,-2.8378;1.7636,-3.6675,-5.1394;1.4961,-5.8768,-4.2064;1.1476,-5.3031,-2.99;1.4093,-3.0681,-3.92;2.0054,-2.9982,-5.9688;1.5465,-6.9643,-4.3022;.9508,-5.9382,-2.1221;.658,-3.3674,-1.5954;-.3478,-3.8513,-.8583;-.6897,-4.8528,-1.1328;-.3922,-3.5552,.5913;-.447,-3.0928,3.3517;-.7119,-4.5928,1.4756;-.1184,-2.2819,1.1005;-.1424,-2.0534,2.4721;-.7309,-4.3637,2.8501;-.9037,-5.5988,1.0894;.101,-1.4399,.4432;.0861,-1.0484,2.838;-.9471,-5.1901,3.5319;-.4557,-2.9164,4.4313;1.3631,-1.7323,-3.8875;1.486,-1.3289,-2.9826;.3381,3.7134,-1.0307;-2.1259,-2.9798,-1.718;-2.9221,-3.161,-.5827;-3.1178,-2.2915,.3535;-3.8407,-.7257,.6184;-4.7061,-.249,-.9642;-2.5297,.4453,1.2091;-5.0775,-1.0701,1.9801;-3.4126,-4.3714,-.3592;-4.1402,-4.6157,.8351;-4.0075,.0528,-1.7605;-5.3692,.614,-.7722;-5.3296,-1.0774,-1.3469;-1.6463,.5576,.5541;-2.1571,.1285,2.1991;-2.9991,1.4396,1.3256;-5.5347,-.1233,2.3206;-5.8936,-1.734,1.6446;-4.5829,-1.5379,2.8501;-5.0747,-4.0308,.8474;-3.5351,-4.3689,1.721;-4.3746,-5.6885,.8209;4.2828,-2.1946,-.1636;4.1394,-3.2954,-1.0207;3.4938,-4.4522,-.6006;2.9953,-4.5029,.6956;3.1455,-3.4416,1.5835;3.7832,-2.2878,1.1452;4.4959,-3.2283,-2.0518;3.3521,-5.2952,-1.2776;2.2534,-5.688,1.1284;2.7379,-3.5187,2.5925;3.8782,-1.4383,1.8229;-.4859,4.0167,.0618;-1.8573,3.806,.0038;-2.4018,3.29,-1.1669;-1.6168,3.0091,-2.2825;-.246,3.2186,-2.2059;-.0356,4.3782,.9891;-2.5015,4.0132,.8592;-3.838,3.0052,-1.2184;-2.0815,2.6179,-3.1885;.3835,2.9743,-3.0627;2.1543,-5.8942,2.3169;1.7618,-6.3929,.2659;-4.3258,2.7325,-2.2943;-4.4613,3.0398,-.1738;6.6147,.1595,-2.0385;5.9404,1.4073,-1.8987;7.7871,.0845,-2.8403;8.258,1.1889,-3.5059;8.3013,-.8775,-2.928;9.1569,1.1188,-4.1247;6.4364,2.5249,-2.6268;7.5635,2.4186,-3.406;5.9058,3.4775,-2.5694;7.9231,3.2907,-3.9594;4.5842,3.9097,-.2649;3.7674,5.0622,-.0717;5.9373,3.9657,.1735;6.4592,5.1145,.7179;6.5658,3.0781,.08;7.5015,5.1315,1.0484;4.3401,6.2409,.4814;5.6586,6.2731,.8619;3.7037,7.1221,.61;6.0877,7.1835,1.2897;-2.3371,-3.9197,-2.8882;-2.5219,-4.9571,-2.5704;-3.2054,-3.5917,-3.4904;-1.4577,-3.9104,-3.5515;-1.6832,-1.5905,-2.0898;-2.4162,-1.1094,-2.7627;-1.5205,-.9356,-1.2194;-.7322,-1.6323,-2.6443;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662920695502</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001193582149 0.000165866684 0.018359858247 0.005334833893</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057117542 -0.000181437 0.000065624 0.000208225 0.000351636 0.000385167 0.000456174 0.000521095 0.000646540 0.000802876 0.000925916 0.001016487 0.001169604 0.001244302 0.001392596 0.001437583 0.001571427 0.001810621 0.002108700 0.002305747 0.002554825 0.002758707 0.002872237 0.003495894 0.003589667 0.003879914 0.004389766 0.004663794 0.004892349 0.005084022 0.005189733 0.005328279 0.006098035 0.006410935 0.006630386 0.006978362 0.007223505 0.007598935 0.008176069 0.008711194 0.008881310 0.009543698 0.009830964 0.010194596 0.010967709 0.011195806 0.011841334 0.012541774 0.013334595 0.013700085 0.014027329 0.014629772 0.014993666 0.015467606 0.015854866 0.016614521 0.017088561 0.018593706 0.018985771 0.019455572 0.020358511 0.020629666 0.021546693 0.021879676 0.022465633 0.022783352 0.023494949 0.023825570 0.024518087 0.025882801 0.026593054 0.026886657 0.027235764 0.027563493 0.028202405 0.029087342 0.030899149 0.031519784 0.032195468 0.034097992 0.034657528 0.036021492 0.039051173 0.039533123 0.041974596 0.045405700 0.046151482 0.046906372 0.048862176 0.049692831 0.049902571 0.050820810 0.051537028 0.052184194 0.052288427 0.052411814 0.052793471 0.053567982 0.054926989 0.056090537 0.056420052 0.056719914 0.057013618 0.057287797 0.057768316 0.058589680 0.059237792 0.059727719 0.061354798 0.062043718 0.062911154 0.064232664 0.064563888 0.065052848 0.066011474 0.067501182 0.067960857 0.068959614 0.070515729 0.072154880 0.072633296 0.072903111 0.073429265 0.075290512 0.078697314 0.080854455 0.081685721 0.083351192 0.084573187 0.087912230 0.089008651 0.089394785 0.089836999 0.091306431 0.093314881 0.094581471 0.095490589 0.096188944 0.096860301 0.098497772 0.100144434 0.100695749 0.102684407 0.103735325 0.104200551 0.106466808 0.108957999 0.110892817 0.112273679 0.112811569 0.113834723 0.114761051 0.116944872 0.117177537 0.118632849 0.119308572 0.120586052 0.122294792 0.125174034 0.125776675 0.128506282 0.129009746 0.130986922 0.133661420 0.136366180 0.137736953 0.138647406 0.139629922 0.140543372 0.143521084 0.144699008 0.145926729 0.146789341 0.151987189 0.153631795 0.154289081 0.160817397 0.161347421 0.168537600 0.171458422 0.175972147 0.179093286 0.181611180 0.184425894 0.189095840 0.189853100 0.191869093 0.201297925 0.202218725 0.206293280 0.206962845 0.207266363 0.212350280 0.212577748 0.215545292 0.217024288 0.220378503 0.221019613 0.224548643 0.224862693 0.226255524 0.231853925 0.234544289 0.235527876 0.238552913 0.246454343 0.249273711 0.251931075 0.256553625 0.257216479 0.258277806 0.262558379 0.271576368 0.282900989 0.292018745 0.299969622 0.300163182 0.301049411 0.307122443 0.307783842 0.309845034 0.320032320 0.321361519 0.326451708 0.330144081 0.336596321 0.347759731 0.352024685 0.355649607 0.360797317 0.361635589 0.364133660 0.384517844 0.407019249 0.414439021 0.430269818 0.432171348 0.435272187 0.450879335 0.464648660 0.475624242 0.478832423 0.480396679 0.486661066 0.498898395 0.503936807 0.515158473 0.517924926 0.543787852 0.566926364 0.567683894 0.586597915 0.592186285 0.605741801 0.644242546 0.645395787 0.668024059 0.675674195 0.687374394 0.703918011 0.704359194 0.705965807 0.709699081 0.717214116 0.734031740 0.738009059 0.739756001 0.747584795 0.750793121 0.771611610 0.775983561 0.808993068 0.821826578 0.824067739 0.828932356 0.834274186 0.847175314 0.849435478 0.851398450 0.854536895 0.863304258 0.867471492 0.875883279 0.887479536 0.891129692 0.892451658 0.893557534 0.902072670 0.910278057 0.918096393 0.923866010 0.924633187 0.931998095 0.935684257 0.956015988 0.962966650 0.965217275 0.970112888 0.978249557 0.982578113 0.998643299 1.012997557 1.016010400 1.021860866 1.040195988 1.055088459 1.071097392 1.072623755 1.079477014 1.087371480 1.108394810 1.110422328 1.117408065 1.118938140 1.122612140 1.123876442 1.141866932 1.148954005 1.161761454 1.170176122 1.177222145 1.187273908 1.200759158 1.221818506 1.233960071 1.258140519 1.296468002 1.298312712 1.314729377 1.326481823 1.327534533 1.330229491 1.331391690 1.334794404 1.342275081 1.348850089 1.366034123 1.380002406 1.381323890 1.381834497 1.429522603 1.517334242 1.557994883 1.684741458 1.923009715</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">237</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92030265" y3="-0.95391319" z3="-0.67779106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59931005" y3="-1.95253705" z3="-1.54948676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08263966" y3="-0.99770394" z3="-1.41232883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77540955" y3="1.47703973" z3="-1.06817082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29062982" y3="0.31274779" z3="-0.49725236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6556144" y3="2.73741758" z3="-1.14977794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00677693" y3="2.7360445" z3="-0.85136849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38340125" y3="4.99796725" z3="-0.3824166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81039473" y3="3.85383262" z3="-0.88540549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75855233" y3="5.87476399" z3="-0.1872636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08653979" y3="1.61003751" z3="-1.66682238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13464105" y3="0.36280832" z3="0.22700776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71599995" y3="0.38483022" z3="-0.62274726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6157669" y3="0.73447376" z3="0.31008721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66317088" y3="-0.85751827" z3="-1.48393406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09551639" y3="-2.47377533" z3="-1.3106798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.05945272" y3="-5.4809961" z3="-6.26111328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.78475523" y3="-5.04818492" z3="-5.29492789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06554955" y3="-3.91174378" z3="-2.84171568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.75078906" y3="-3.66794477" z3="-5.14540603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48748899" y3="-5.87675049" z3="-4.21009082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14241412" y3="-5.30241345" z3="-2.99307542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.40017071" y3="-3.06800076" z3="-3.92542649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98947476" y3="-2.99914298" z3="-5.9759763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53813182" y3="-6.96429522" z3="-4.30550873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94839498" y3="-5.93707633" z3="-2.12425268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65476317" y3="-3.36523441" z3="-1.5990838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34921552" y3="-3.84939229" z3="-0.85914371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69131275" y3="-4.85112234" z3="-1.13205932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.39072754" y3="-3.55169344" z3="0.59011296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4353436" y3="-3.08663404" z3="3.35037013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70740472" y3="-4.58803535" z3="1.47712614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1163392" y3="-2.27760611" z3="1.09630519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13581675" y3="-2.04723519" z3="2.46761595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72114157" y3="-4.35777315" z3="2.85157754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90193047" y3="-5.59287778" z3="1.092548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10001322" y3="-1.43643989" z3="0.43646228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09373467" y3="-1.04217803" z3="2.83107227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.93337032" y3="-5.18382811" z3="3.5361533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43891488" y3="-2.91011924" z3="4.42994778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35317688" y3="-1.73224547" z3="-3.89333797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48013802" y3="-1.32848231" z3="-2.98904043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33949883" y3="3.71239674" z3="-1.03752622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12902205" y3="-2.97930919" z3="-1.71599941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92252213" y3="-3.16209892" z3="-0.57929015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11715099" y3="-2.29301793" z3="0.3577315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84149918" y3="-0.72743879" z3="0.62312939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71360989" y3="-0.25479958" z3="-0.95712441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.530691" y3="0.44688136" z3="1.20827264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07197427" y3="-1.07279939" z3="1.98980743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41038038" y3="-4.3736764" z3="-0.35442978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1368962" y3="-4.61775928" z3="0.84046006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01855191" y3="0.04302447" z3="-1.75823077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37408582" y3="0.61046934" z3="-0.76524126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34085667" y3="-1.08339448" z3="-1.33378171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64830462" y3="0.55821009" z3="0.55209059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15676536" y3="0.13392394" z3="2.1986596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00071124" y3="1.44148686" z3="1.32143355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5306119" y3="-0.12706084" z3="2.33119426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88749131" y3="-1.73915261" z3="1.65737875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57338372" y3="-1.53865193" z3="2.85844911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07138598" y3="-4.03356805" z3="0.85318025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53165128" y3="-4.36906729" z3="1.72597868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37014164" y3="-5.69057968" z3="0.82686118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2824046" y3="-2.19449433" z3="-0.16473952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13847229" y3="-3.293986" z3="-1.02332058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49211756" y3="-4.45069279" z3="-0.60472172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99407311" y3="-4.50287777" z3="0.69161598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1447307" y3="-3.44294445" z3="1.58080768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78255604" y3="-2.28888938" z3="1.14388726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4951851" y3="-3.22560587" z3="-2.0542874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34937589" y3="-5.29217993" z3="-1.28300484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25230824" y3="-5.68817796" z3="1.12321101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73720514" y3="-3.52114013" z3="2.58978368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8774828" y3="-1.43988979" z3="1.82237364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48621789" y3="4.0174756" z3="0.05241428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85721917" y3="3.80450874" z3="-0.00572788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40022125" y3="3.28627377" z3="-1.17666618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61371861" y3="3.00448289" z3="-2.29084564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24287741" y3="3.21492535" z3="-2.21213373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03702653" y3="4.37988185" z3="0.98055542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5026892" y3="4.01303139" z3="0.84785649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83604156" y3="2.99935016" z3="-1.22899419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07695063" y3="2.61106762" z3="-3.19634929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38721049" y3="2.97125019" z3="-3.06957067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15502667" y3="-5.8966571" z3="2.31159119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75903467" y3="-6.39109744" z3="0.26011272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32188171" y3="2.72112366" z3="-2.30421982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46092845" y3="3.03825428" z3="-0.18561926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61994732" y3="0.16041617" z3="-2.03133025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94485161" y3="1.40785716" z3="-1.89382366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79563212" y3="0.08604063" z3="-2.82828861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26900882" y3="1.19080263" z3="-3.49155727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31052852" y3="-0.8757626" z3="-2.91395985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17068556" y3="1.12128097" z3="-4.10629489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44337023" y3="2.52570385" z3="-2.62000653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57361909" y3="2.42005124" z3="-3.39449245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91211536" y3="3.47796752" z3="-2.5647962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93523597" y3="3.2923859" z3="-3.94621421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58393103" y3="3.90936997" z3="-0.26257469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76631133" y3="5.06147017" z3="-0.0701331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93616041" y3="3.96520472" z3="0.1787918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4566314" y3="5.11346995" z3="0.72568656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56543612" y3="3.07796769" z3="0.08527154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49868075" y3="5.1302565" z3="1.05787602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33734087" y3="6.23951897" z3="0.48598406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65510924" y3="6.27154376" z3="0.86959885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70037418" y3="7.12018182" z3="0.61381034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.08297486" y3="7.18142079" z3="1.29962002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34125964" y3="-3.91930224" z3="-2.88609699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52304042" y3="-4.95748567" z3="-2.56850205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21194354" y3="-3.59259249" z3="-3.4857787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46333894" y3="-3.90745571" z3="-3.55130324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68907403" y3="-1.58904322" z3="-2.08848679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42366364" y3="-1.10921565" z3="-2.76036618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52570278" y3="-0.9337074" z3="-1.21872545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73807758" y3="-1.62975946" z3="-2.64374181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9203,-.9539,-.6778;6.5993,-1.9525,-1.5495;6.0826,-.9977,-1.4123;4.7754,1.477,-1.0682;4.2906,.3127,-.4973;2.6556,2.7374,-1.1498;4.0068,2.736,-.8514;2.3834,4.998,-.3824;1.8104,3.8538,-.8854;1.7586,5.8748,-.1873;2.0865,1.61,-1.6668;3.1346,.3628,.227;1.716,.3848,-.6227;.6158,.7345,.3101;1.6632,-.8575,-1.4839;1.0955,-2.4738,-1.3107;2.0595,-5.481,-6.2611;1.7848,-5.0482,-5.2949;1.0655,-3.9117,-2.8417;1.7508,-3.6679,-5.1454;1.4875,-5.8768,-4.2101;1.1424,-5.3024,-2.9931;1.4002,-3.068,-3.9254;1.9895,-2.9991,-5.976;1.5381,-6.9643,-4.3055;.9484,-5.9371,-2.1243;.6548,-3.3652,-1.5991;-.3492,-3.8494,-.8591;-.6913,-4.8511,-1.1321;-.3907,-3.5517,.5901;-.4353,-3.0866,3.3504;-.7074,-4.588,1.4771;-.1163,-2.2776,1.0963;-.1358,-2.0472,2.4676;-.7211,-4.3578,2.8516;-.9019,-5.5929,1.0925;.1,-1.4364,.4365;.0937,-1.0422,2.8311;-.9334,-5.1838,3.5362;-.4389,-2.9101,4.4299;1.3532,-1.7322,-3.8933;1.4801,-1.3285,-2.989;.3395,3.7124,-1.0375;-2.129,-2.9793,-1.716;-2.9225,-3.1621,-.5793;-3.1172,-2.293,.3577;-3.8415,-.7274,.6231;-4.7136,-.2548,-.9571;-2.5307,.4469,1.2083;-5.072,-1.0728,1.9898;-3.4104,-4.3737,-.3544;-4.1369,-4.6178,.8405;-4.0186,.043,-1.7582;-5.3741,.6105,-.7652;-5.3409,-1.0834,-1.3338;-1.6483,.5582,.5521;-2.1568,.1339,2.1987;-3.0007,1.4415,1.3214;-5.5306,-.1271,2.3312;-5.8875,-1.7392,1.6574;-4.5734,-1.5387,2.8584;-5.0714,-4.0336,.8532;-3.5317,-4.3691,1.726;-4.3701,-5.6906,.8269;4.2824,-2.1945,-.1647;4.1385,-3.294,-1.0233;3.4921,-4.4507,-.6047;2.9941,-4.5029,.6916;3.1447,-3.4429,1.5808;3.7826,-2.2889,1.1439;4.4952,-3.2256,-2.0543;3.3494,-5.2922,-1.283;2.2523,-5.6882,1.1232;2.7372,-3.5211,2.5898;3.8775,-1.4399,1.8224;-.4862,4.0175,.0524;-1.8572,3.8045,-.0057;-2.4002,3.2863,-1.1767;-1.6137,3.0045,-2.2908;-.2429,3.2149,-2.2121;-.037,4.3799,.9806;-2.5027,4.013,.8479;-3.836,2.9994,-1.229;-2.077,2.6111,-3.1963;.3872,2.9713,-3.0696;2.155,-5.8967,2.3116;1.759,-6.3911,.2601;-4.3219,2.7211,-2.3042;-4.4609,3.0383,-.1856;6.6199,.1604,-2.0313;5.9449,1.4079,-1.8938;7.7956,.086,-2.8283;8.269,1.1908,-3.4916;8.3105,-.8758,-2.914;9.1707,1.1213,-4.1063;6.4434,2.5257,-2.62;7.5736,2.4201,-3.3945;5.9121,3.478,-2.5648;7.9352,3.2924,-3.9462;4.5839,3.9094,-.2626;3.7663,5.0615,-.0701;5.9362,3.9652,.1788;6.4566,5.1135,.7257;6.5654,3.078,.0853;7.4987,5.1303,1.0579;4.3373,6.2395,.486;5.6551,6.2715,.8696;3.7004,7.1202,.6138;6.083,7.1814,1.2996;-2.3413,-3.9193,-2.8861;-2.523,-4.9575,-2.5685;-3.2119,-3.5926,-3.4858;-1.4633,-3.9075,-3.5513;-1.6891,-1.589,-2.0885;-2.4237,-1.1092,-2.7604;-1.5257,-.9337,-1.2187;-.7381,-1.6298,-2.6437;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662924007225</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001303689081 0.000164643147 0.017936363260 0.005347905055</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057117934 -0.000135855 0.000060829 0.000196696 0.000351482 0.000385656 0.000456344 0.000521206 0.000646553 0.000802822 0.000935369 0.001017993 0.001169655 0.001247990 0.001397671 0.001437597 0.001587664 0.001815992 0.002109135 0.002313812 0.002555637 0.002765113 0.002875487 0.003499222 0.003592265 0.003880191 0.004389834 0.004663166 0.004893111 0.005086121 0.005190839 0.005328983 0.006097906 0.006419364 0.006630511 0.006978502 0.007225253 0.007599033 0.008181027 0.008711293 0.008881282 0.009546420 0.009837334 0.010194639 0.010970704 0.011198386 0.011849222 0.012545864 0.013339127 0.013710892 0.014027968 0.014630297 0.014994793 0.015470810 0.015856846 0.016614953 0.017092161 0.018596872 0.018993442 0.019455680 0.020358487 0.020630224 0.021547640 0.021879726 0.022466172 0.022783405 0.023497894 0.023825656 0.024518136 0.025882835 0.026594753 0.026887359 0.027236374 0.027563254 0.028204445 0.029087544 0.030899155 0.031521194 0.032194354 0.034099929 0.034657589 0.036021431 0.039052087 0.039533319 0.041975668 0.045406229 0.046153637 0.046906271 0.048863377 0.049692839 0.049902745 0.050821108 0.051537339 0.052184523 0.052288433 0.052412066 0.052806123 0.053568720 0.054927783 0.056091285 0.056420052 0.056720646 0.057014522 0.057288959 0.057768458 0.058589805 0.059238480 0.059728342 0.061355045 0.062044905 0.062911146 0.064232877 0.064564006 0.065053391 0.066012445 0.067502865 0.067961015 0.068960661 0.070515880 0.072154717 0.072634341 0.072903588 0.073429875 0.075290256 0.078703579 0.080854518 0.081689201 0.083351555 0.084573469 0.087912151 0.089009236 0.089394916 0.089837011 0.091307047 0.093315796 0.094581471 0.095490674 0.096190683 0.096860404 0.098498353 0.100145196 0.100697004 0.102696836 0.103759148 0.104208601 0.106476541 0.108980073 0.110901471 0.112273684 0.112815594 0.113836855 0.114762193 0.116946845 0.117182168 0.118632827 0.119309341 0.120586613 0.122295149 0.125174554 0.125778182 0.128507942 0.129009797 0.130986989 0.133661666 0.136366736 0.137737073 0.138647482 0.139629916 0.140545078 0.143520898 0.144700289 0.145932641 0.146791270 0.151987671 0.153633193 0.154288959 0.160817983 0.161351066 0.168537572 0.171458381 0.175972381 0.179093669 0.181611620 0.184425872 0.189098266 0.189853784 0.191870506 0.201298652 0.202219477 0.206293184 0.206963296 0.207266436 0.212350745 0.212577795 0.215553586 0.217032964 0.220389467 0.221019738 0.224548560 0.224885523 0.226295829 0.231854401 0.234544842 0.235529000 0.238553223 0.246454155 0.249275168 0.251932279 0.256553705 0.257218097 0.258279667 0.262559286 0.271576468 0.282901004 0.292018757 0.299969941 0.300163794 0.301049928 0.307124222 0.307783852 0.309846448 0.320035663 0.321361837 0.326452058 0.330162928 0.336597919 0.347759851 0.352024698 0.355649759 0.360797608 0.361647754 0.364134915 0.384522582 0.407030308 0.414441581 0.430269927 0.432171618 0.435272828 0.450885153 0.464648764 0.475624911 0.478833875 0.480397343 0.486663538 0.498898471 0.503939394 0.515166691 0.517928328 0.543788303 0.566926408 0.567684275 0.586600895 0.592186948 0.605742635 0.644247838 0.645395771 0.668025334 0.675676058 0.687375001 0.703921260 0.704359643 0.705970825 0.709728344 0.717214404 0.734032050 0.738009098 0.739757130 0.747591614 0.750794291 0.771611889 0.775983880 0.808993072 0.821826837 0.824070443 0.828932466 0.834276096 0.847192054 0.849437690 0.851398718 0.854537578 0.863304850 0.867471505 0.875884145 0.887487119 0.891132874 0.892457231 0.893563772 0.902072915 0.910278135 0.918099047 0.923869358 0.924636535 0.932000391 0.935686107 0.956019278 0.962967539 0.965217533 0.970112841 0.978249784 0.982581009 0.998643466 1.012998481 1.016033613 1.021862740 1.040196144 1.055088667 1.071125860 1.072629608 1.079477013 1.087374699 1.108405120 1.110422481 1.117487680 1.118957135 1.122614501 1.123880471 1.141869042 1.148963645 1.161761450 1.170176346 1.177222774 1.187283589 1.200760308 1.221818519 1.233966949 1.258141540 1.296468033 1.298313426 1.314730636 1.326481910 1.327535141 1.330232020 1.331392436 1.334794409 1.342288506 1.348854560 1.366160155 1.380002516 1.381324415 1.381839038 1.429546708 1.517341071 1.557996074 1.684743925 1.923013653</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">238</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91821916" y3="-0.95412117" z3="-0.67945268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59910663" y3="-1.95265177" z3="-1.5479495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08249076" y3="-0.99769321" z3="-1.41106073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77538068" y3="1.47734702" z3="-1.06720248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28844748" y3="0.31252568" z3="-0.49918738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65636784" y3="2.73885968" z3="-1.1532464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00675" y3="2.73641869" z3="-0.85115331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38311677" y3="4.99820561" z3="-0.3827893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81079763" y3="3.85511465" z3="-0.88895371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7578403" y3="5.87502016" z3="-0.18558744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08819509" y3="1.61235454" z3="-1.67330315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13042051" y3="0.36197723" z3="0.2218583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7141041" y3="0.38611693" z3="-0.63164862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61193961" y3="0.73572354" z3="0.29904928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66240123" y3="-0.85539936" z3="-1.49412214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09433788" y3="-2.47152968" z3="-1.31740544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04151636" y3="-5.48397494" z3="-6.26830279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77074589" y3="-5.05034382" z3="-5.3013778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06118507" y3="-3.91183994" z3="-2.84629115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73675501" y3="-3.6699999" z3="-5.15313041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47857346" y3="-5.8779684" z3="-4.21435365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13829976" y3="-5.30258575" z3="-2.99652336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39098517" y3="-3.06898729" z3="-3.93226239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97165052" y3="-3.0019744" z3="-5.9854787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5294122" y3="-6.96559206" z3="-4.30874929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94806518" y3="-5.93645923" z3="-2.12619878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65438142" y3="-3.36498916" z3="-1.60250393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34718627" y3="-3.84878703" z3="-0.85939482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68904724" y3="-4.85143514" z3="-1.12951571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38540943" y3="-3.54810544" z3="0.5894279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42878893" y3="-3.07403682" z3="3.3478996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69783932" y3="-4.5830925" z3="1.47935437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11299019" y3="-2.27202518" z3="1.09222224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.13102316" y3="-2.03760657" z3="2.46280866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71104631" y3="-4.34817711" z3="2.85296504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88867411" y3="-5.59115279" z3="1.09825815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10021422" y3="-1.43206715" z3="0.43019606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09605496" y3="-1.0302827" z3="2.82316607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9217875" y3="-5.1722373" z3="3.53898579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43303046" y3="-2.89297588" z3="4.4266832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34358397" y3="-1.7332016" z3="-3.90143826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47415622" y3="-1.32849524" z3="-2.99816462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34012363" y3="3.71398712" z3="-1.04332067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13083447" y3="-2.98206737" z3="-1.71327134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92141795" y3="-3.16329723" z3="-0.57414468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11517065" y3="-2.29262408" z3="0.36150242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84042923" y3="-0.72725791" z3="0.62485163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71450564" y3="-0.25635845" z3="-0.95431046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53059352" y3="0.44896934" z3="1.2071067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07083466" y3="-1.07197383" z3="1.99216177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40746916" y3="-4.37462503" z3="-0.34593464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1285964" y3="-4.61892191" z3="0.85241164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02121372" y3="0.04095403" z3="-1.75658837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37512406" y3="0.60843682" z3="-0.76212218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34138718" y3="-1.08571395" z3="-1.3287559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64754401" y3="0.55771068" z3="0.55134511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15810803" y3="0.13958722" z3="2.19928981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00121071" y3="1.44360784" z3="1.31642248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52967777" y3="-0.12584161" z3="2.33184558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8859206" y3="-1.7390601" z3="1.66094903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57217188" y3="-1.53661965" z3="2.86119664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06548118" y3="-4.0378505" z3="0.8675274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52042621" y3="-4.36738096" z3="1.73503256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35877505" y3="-5.69287148" z3="0.84233185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27943789" y3="-2.19491261" z3="-0.16807797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13596234" y3="-3.29381757" z3="-1.02747808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49127462" y3="-4.45182923" z3="-0.60924469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99455617" y3="-4.50580369" z3="0.68753388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14402433" y3="-3.44597762" z3="1.57720582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77988241" y3="-2.29053693" z3="1.14053494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49233901" y3="-3.22424092" z3="-2.05847503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34948063" y3="-5.29360685" z3="-1.28784551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25541413" y3="-5.69304062" z3="1.11914604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73739183" y3="-3.52554212" z3="2.58642796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87430383" y3="-1.44194037" z3="1.81948861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4867787" y3="4.01797853" z3="0.04682535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85756363" y3="3.80437041" z3="-0.0133747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39866209" y3="3.28455338" z3="-1.18395075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61095729" y3="3.00341701" z3="-2.29752385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24088333" y3="3.21654233" z3="-2.21895068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03903832" y3="4.38136919" z3="0.97483033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50388996" y3="4.01213912" z3="0.84006927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83414544" y3="2.99598077" z3="-1.23724387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07299742" y3="2.60937115" z3="-3.2035735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39057989" y3="2.97239245" z3="-3.07429774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15934578" y3="-5.90232922" z3="2.30737921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76272046" y3="-6.39658583" z3="0.25615929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31858937" y3="2.71492213" z3="-2.31228433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46017468" y3="3.0364343" z3="-0.19453938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62221632" y3="0.16101912" z3="-2.02685349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94742584" y3="1.40874516" z3="-1.8892593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80035914" y3="0.08715389" z3="-2.82039185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27657885" y3="1.19279561" z3="-3.48016997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31495588" y3="-0.87490992" z3="-2.90619261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18019598" y3="1.12368943" z3="-4.09224742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44902211" y3="2.52759606" z3="-2.6117776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5817152" y3="2.42249053" z3="-3.38290987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9182962" y3="3.480271" z3="-2.55624207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94574959" y3="3.29565294" z3="-3.93173362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58294347" y3="3.90854982" z3="-0.25908441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76543358" y3="5.06071241" z3="-0.06733911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93346587" y3="3.96297089" z3="0.18715206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45273788" y3="5.11005224" z3="0.7377077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56220606" y3="3.07547536" z3="0.09484172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49309322" y3="5.12584444" z3="1.07424503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33546025" y3="6.23762575" z3="0.49211598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65177023" y3="6.26836998" z3="0.88029296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69866962" y3="7.11849035" z3="0.61943373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07874597" y3="7.17732182" z3="1.31310897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34535788" y3="-3.92434254" z3="-2.8811866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52706476" y3="-4.96159774" z3="-2.56103036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21670161" y3="-3.59851731" z3="-3.4799595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46896645" y3="-3.91467552" z3="-3.54851916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69212397" y3="-1.59261769" z3="-2.08905814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42782097" y3="-1.11453309" z3="-2.76104823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52878243" y3="-0.93552469" z3="-1.22045097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74249668" y3="-1.6334132" z3="-2.64587686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9182,-.9541,-.6795;6.5991,-1.9527,-1.5479;6.0825,-.9977,-1.4111;4.7754,1.4773,-1.0672;4.2884,.3125,-.4992;2.6564,2.7389,-1.1532;4.0068,2.7364,-.8512;2.3831,4.9982,-.3828;1.8108,3.8551,-.889;1.7578,5.875,-.1856;2.0882,1.6124,-1.6733;3.1304,.362,.2219;1.7141,.3861,-.6316;.6119,.7357,.299;1.6624,-.8554,-1.4941;1.0943,-2.4715,-1.3174;2.0415,-5.484,-6.2683;1.7707,-5.0503,-5.3014;1.0612,-3.9118,-2.8463;1.7368,-3.67,-5.1531;1.4786,-5.878,-4.2144;1.1383,-5.3026,-2.9965;1.391,-3.069,-3.9323;1.9717,-3.002,-5.9855;1.5294,-6.9656,-4.3087;.9481,-5.9365,-2.1262;.6544,-3.365,-1.6025;-.3472,-3.8488,-.8594;-.689,-4.8514,-1.1295;-.3854,-3.5481,.5894;-.4288,-3.074,3.3479;-.6978,-4.5831,1.4794;-.113,-2.272,1.0922;-.131,-2.0376,2.4628;-.711,-4.3482,2.853;-.8887,-5.5912,1.0983;.1002,-1.4321,.4302;.0961,-1.0303,2.8232;-.9218,-5.1722,3.539;-.433,-2.893,4.4267;1.3436,-1.7332,-3.9014;1.4742,-1.3285,-2.9982;.3401,3.714,-1.0433;-2.1308,-2.9821,-1.7133;-2.9214,-3.1633,-.5741;-3.1152,-2.2926,.3615;-3.8404,-.7273,.6249;-4.7145,-.2564,-.9543;-2.5306,.449,1.2071;-5.0708,-1.072,1.9922;-3.4075,-4.3746,-.3459;-4.1286,-4.6189,.8524;-4.0212,.041,-1.7566;-5.3751,.6084,-.7621;-5.3414,-1.0857,-1.3288;-1.6475,.5577,.5513;-2.1581,.1396,2.1993;-3.0012,1.4436,1.3164;-5.5297,-.1258,2.3318;-5.8859,-1.7391,1.6609;-4.5722,-1.5366,2.8612;-5.0655,-4.0379,.8675;-3.5204,-4.3674,1.735;-4.3588,-5.6929,.8423;4.2794,-2.1949,-.1681;4.136,-3.2938,-1.0275;3.4913,-4.4518,-.6092;2.9946,-4.5058,.6875;3.144,-3.446,1.5772;3.7799,-2.2905,1.1405;4.4923,-3.2242,-2.0585;3.3495,-5.2936,-1.2878;2.2554,-5.693,1.1191;2.7374,-3.5255,2.5864;3.8743,-1.4419,1.8195;-.4868,4.018,.0468;-1.8576,3.8044,-.0134;-2.3987,3.2846,-1.184;-1.611,3.0034,-2.2975;-.2409,3.2165,-2.219;-.039,4.3814,.9748;-2.5039,4.0121,.8401;-3.8341,2.996,-1.2372;-2.073,2.6094,-3.2036;.3906,2.9724,-3.0743;2.1593,-5.9023,2.3074;1.7627,-6.3966,.2562;-4.3186,2.7149,-2.3123;-4.4602,3.0364,-.1945;6.6222,.161,-2.0269;5.9474,1.4087,-1.8893;7.8004,.0872,-2.8204;8.2766,1.1928,-3.4802;8.315,-.8749,-2.9062;9.1802,1.1237,-4.0922;6.449,2.5276,-2.6118;7.5817,2.4225,-3.3829;5.9183,3.4803,-2.5562;7.9457,3.2957,-3.9317;4.5829,3.9085,-.2591;3.7654,5.0607,-.0673;5.9335,3.963,.1872;6.4527,5.1101,.7377;6.5622,3.0755,.0948;7.4931,5.1258,1.0742;4.3355,6.2376,.4921;5.6518,6.2684,.8803;3.6987,7.1185,.6194;6.0787,7.1773,1.3131;-2.3454,-3.9243,-2.8812;-2.5271,-4.9616,-2.561;-3.2167,-3.5985,-3.48;-1.469,-3.9147,-3.5485;-1.6921,-1.5926,-2.0891;-2.4278,-1.1145,-2.761;-1.5288,-.9355,-1.2205;-.7425,-1.6334,-2.6459;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926992136</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001435052480 0.000163635620 0.023033069623 0.005332858431</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057117942 -0.000148933 0.000054100 0.000204785 0.000352593 0.000385799 0.000460509 0.000521254 0.000646853 0.000802798 0.000942048 0.001018721 0.001169679 0.001255873 0.001400967 0.001437577 0.001607968 0.001821491 0.002108968 0.002327423 0.002558641 0.002771089 0.002881734 0.003501906 0.003595346 0.003880506 0.004390212 0.004663787 0.004894667 0.005087886 0.005191432 0.005330230 0.006099277 0.006426616 0.006630791 0.006978610 0.007227449 0.007603239 0.008182998 0.008711335 0.008881616 0.009550643 0.009842387 0.010195691 0.010974273 0.011201739 0.011859353 0.012552382 0.013347792 0.013724416 0.014029620 0.014630775 0.014996769 0.015472889 0.015859279 0.016615384 0.017094979 0.018598486 0.018999430 0.019455721 0.020358462 0.020631829 0.021548581 0.021879596 0.022468203 0.022783632 0.023499230 0.023825802 0.024518157 0.025882853 0.026599590 0.026888988 0.027236922 0.027563510 0.028207513 0.029087943 0.030899140 0.031522550 0.032193831 0.034100976 0.034657717 0.036021531 0.039052731 0.039533359 0.041977325 0.045406899 0.046155643 0.046907311 0.048865581 0.049692860 0.049903894 0.050821425 0.051537585 0.052185100 0.052288444 0.052412625 0.052822489 0.053570073 0.054928326 0.056092159 0.056420067 0.056721024 0.057014803 0.057290519 0.057768534 0.058590276 0.059239288 0.059729230 0.061355464 0.062047635 0.062911612 0.064233044 0.064564011 0.065053375 0.066012645 0.067504299 0.067961277 0.068962513 0.070516451 0.072154808 0.072635916 0.072904606 0.073429770 0.075290143 0.078708914 0.080855266 0.081690955 0.083352222 0.084573826 0.087912433 0.089009107 0.089395831 0.089837094 0.091308445 0.093317723 0.094581413 0.095490835 0.096194075 0.096860392 0.098499566 0.100145486 0.100697850 0.102711002 0.103788240 0.104222320 0.106486996 0.109000989 0.110911679 0.112273914 0.112820027 0.113837852 0.114762673 0.116950547 0.117188506 0.118633179 0.119310068 0.120586874 0.122295116 0.125175813 0.125780348 0.128510308 0.129010094 0.130987362 0.133661665 0.136367083 0.137737084 0.138647746 0.139629936 0.140546237 0.143520765 0.144700697 0.145936013 0.146793144 0.151987994 0.153633775 0.154288812 0.160818153 0.161351208 0.168538012 0.171458437 0.175972908 0.179094535 0.181612416 0.184425771 0.189099797 0.189858013 0.191870520 0.201299702 0.202220481 0.206293090 0.206963920 0.207266466 0.212350987 0.212577910 0.215561879 0.217038040 0.220400962 0.221020628 0.224548979 0.224902654 0.226326609 0.231855260 0.234545781 0.235531561 0.238553717 0.246454154 0.249274408 0.251935681 0.256554216 0.257219641 0.258281519 0.262560190 0.271576625 0.282902016 0.292018768 0.299972745 0.300163820 0.301050200 0.307126296 0.307783985 0.309847345 0.320038849 0.321362488 0.326452953 0.330189790 0.336598053 0.347760153 0.352024716 0.355649748 0.360801344 0.361668283 0.364136649 0.384528012 0.407041975 0.414443038 0.430269882 0.432171498 0.435273971 0.450890547 0.464648963 0.475625536 0.478835232 0.480398291 0.486668728 0.498898729 0.503941458 0.515171482 0.517935392 0.543788933 0.566926539 0.567684640 0.586602565 0.592189268 0.605747946 0.644250849 0.645396127 0.668026051 0.675679450 0.687375168 0.703922179 0.704360350 0.705970224 0.709740008 0.717215865 0.734039333 0.738009673 0.739758763 0.747601759 0.750796365 0.771612246 0.775984310 0.808993261 0.821827248 0.824073569 0.828932526 0.834277929 0.847220581 0.849442465 0.851399053 0.854539810 0.863307136 0.867471566 0.875884240 0.887493075 0.891133165 0.892464015 0.893574663 0.902072968 0.910279638 0.918099402 0.923869406 0.924637789 0.932002230 0.935687261 0.956027377 0.962968477 0.965218047 0.970113352 0.978253964 0.982581971 0.998643565 1.013000453 1.016056445 1.021865018 1.040196257 1.055089210 1.071148136 1.072637958 1.079476930 1.087377748 1.108415130 1.110422691 1.117547727 1.118972338 1.122615952 1.123882589 1.141871839 1.148972093 1.161761463 1.170176354 1.177222771 1.187303890 1.200761425 1.221823467 1.233972365 1.258142719 1.296468144 1.298313439 1.314733189 1.326481928 1.327538696 1.330236849 1.331394577 1.334794428 1.342313667 1.348862657 1.366323838 1.380002582 1.381325145 1.381841924 1.429553523 1.517355339 1.557996847 1.684746691 1.923013896</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">239</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91759081" y3="-0.95449543" z3="-0.68215527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60021007" y3="-1.95183612" z3="-1.54843492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08327812" y3="-0.99708576" z3="-1.41145924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77557226" y3="1.47744269" z3="-1.06672177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28725193" y3="0.3117841" z3="-0.5016252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65701715" y3="2.73921481" z3="-1.15510594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00661821" y3="2.73625505" z3="-0.84987095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38166814" y3="4.99664943" z3="-0.37987194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81063372" y3="3.85461583" z3="-0.88991547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75619926" y3="5.87269984" z3="-0.1843494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09063232" y3="1.61355787" z3="-1.67912889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12757066" y3="0.36005542" z3="0.21684902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71308043" y3="0.38655044" z3="-0.63977964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60938738" y3="0.73721092" z3="0.28877991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66180971" y3="-0.85436677" z3="-1.50309197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0936751" y3="-2.47122059" z3="-1.32164154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02536652" y3="-5.49101072" z3="-6.27155459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75803482" y3="-5.05580182" z3="-5.30433278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05643675" y3="-3.91335679" z3="-2.84879809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72396098" y3="-3.67515543" z3="-5.1583381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47023785" y3="-5.88171943" z3="-4.21484745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13386517" y3="-5.30439028" z3="-2.99677425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38232082" y3="-3.07222681" z3="-3.93721853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95544291" y3="-3.00843482" z3="-5.99267801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52129506" y3="-6.96950495" z3="-4.30762189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94676883" y3="-5.93685024" z3="-2.1247566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65237008" y3="-3.36405955" z3="-1.6050931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34714963" y3="-3.84726959" z3="-0.85871811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68906594" y3="-4.85051387" z3="-1.12638686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38238241" y3="-3.5438269" z3="0.58954046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41214103" y3="-3.06686906" z3="3.3482631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68997149" y3="-4.57739814" z3="1.4830397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11042772" y3="-2.26640293" z3="1.08852028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12239011" y3="-2.0299191" z3="2.45890441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.696459" y3="-4.34095626" z3="2.85664756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88284942" y3="-5.58485149" z3="1.10420084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09801489" y3="-1.42713056" z3="0.42374029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10532367" y3="-1.02222437" z3="2.81621892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9014081" y3="-5.16487996" z3="3.54627898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40999739" y3="-2.88555766" z3="4.4271216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33435706" y3="-1.73638643" z3="-3.90825936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4676013" y3="-1.33018614" z3="-3.00604623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.340347" y3="3.71336619" z3="-1.04691697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13313541" y3="-2.98359756" z3="-1.71116253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9203243" y3="-3.16321304" z3="-0.56964696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11289092" y3="-2.29022466" z3="0.36416483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8402532" y3="-0.72573723" z3="0.62507716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71376102" y3="-0.2580688" z3="-0.9559504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53094047" y3="0.45210596" z3="1.20669193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07102507" y3="-1.06915313" z3="1.99187958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40355225" y3="-4.37511978" z3="-0.33677045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12303473" y3="-4.61596496" z3="0.86273964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01995457" y3="0.03859372" z3="-1.75822315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37490171" y3="0.60685388" z3="-0.76588118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34014513" y3="-1.08809726" z3="-1.32999717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64725682" y3="0.55957234" z3="0.55129543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15929196" y3="0.14497949" z3="2.19977433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00155486" y3="1.44713989" z3="1.3130307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53257674" y3="-0.12333157" z3="2.3291381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88435305" y3="-1.73868402" z3="1.66051409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57268885" y3="-1.5305102" z3="2.86303503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05974588" y3="-4.03519928" z3="0.87733333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51449231" y3="-4.36094583" z3="1.74405168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35213468" y3="-5.68972335" z3="0.85537753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27865729" y3="-2.19577891" z3="-0.17222455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13545063" y3="-3.2941529" z3="-1.03235626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49113825" y3="-4.45236957" z3="-0.61477073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99508868" y3="-4.50729094" z3="0.68226271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14419452" y3="-3.44803091" z3="1.57255928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77926061" y3="-2.29222134" z3="1.13639285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49172312" y3="-3.22382776" z3="-2.06335783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34899151" y3="-5.29323571" z3="-1.29403494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25723882" y3="-5.69510454" z3="1.11368209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73797134" y3="-3.52827957" z3="2.58191305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87315437" y3="-1.44373986" z3="1.8157196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48842461" y3="4.01865228" z3="0.04079936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85903343" y3="3.80445062" z3="-0.02071694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39848078" y3="3.28375613" z3="-1.19203336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60907389" y3="3.00226141" z3="-2.30428822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23878991" y3="3.21488218" z3="-2.22284646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04210541" y3="4.38244616" z3="0.96955511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50666294" y3="4.01297258" z3="0.83139076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83355831" y3="2.99408919" z3="-1.24680339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06948673" y3="2.60711061" z3="-3.21044773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3935486" y3="2.97116218" z3="-3.07851145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16403021" y3="-5.90629334" z3="2.30193499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76278755" y3="-6.39735005" z3="0.25068843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31621328" y3="2.71106215" z3="-2.32216956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46121958" y3="3.03604506" z3="-0.20526671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62434867" y3="0.16252812" z3="-2.02437988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94941425" y3="1.41004525" z3="-1.88627954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80436805" y3="0.0899653" z3="-2.81512976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2824019" y3="1.19672048" z3="-3.47171526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31905144" y3="-0.87193816" z3="-2.90127166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1875458" y3="1.12865565" z3="-4.08155119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45288363" y3="2.5300534" z3="-2.60568306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58748376" y3="2.42623082" z3="-3.37410529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92210982" y3="3.48258223" z3="-2.55002495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95303547" y3="3.30028459" z3="-3.92048637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58113754" y3="3.90693943" z3="-0.25337096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76295008" y3="5.05856652" z3="-0.06039647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9309005" y3="3.96020023" z3="0.19564696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44877357" y3="5.10574228" z3="0.75069784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56023192" y3="3.07302632" z3="0.10156124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48883962" y3="5.12052178" z3="1.08896817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33141852" y3="6.23389984" z3="0.50413218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64697429" y3="6.26352429" z3="0.89540115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6941445" y3="7.11434246" z3="0.63276763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07276021" y3="7.17120345" z3="1.33211718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34939968" y3="-3.92911623" z3="-2.87601314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5283739" y3="-4.96610864" z3="-2.55289323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2234471" y3="-3.60632081" z3="-3.47315499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47460194" y3="-3.91912808" z3="-3.54533816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69683112" y3="-1.59440631" z3="-2.09191472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43410368" y3="-1.11904763" z3="-2.76409214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53197836" y3="-0.93434466" z3="-1.2259145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74724393" y3="-1.63635978" z3="-2.64976999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9176,-.9545,-.6822;6.6002,-1.9518,-1.5484;6.0833,-.9971,-1.4115;4.7756,1.4774,-1.0667;4.2873,.3118,-.5016;2.657,2.7392,-1.1551;4.0066,2.7363,-.8499;2.3817,4.9966,-.3799;1.8106,3.8546,-.8899;1.7562,5.8727,-.1843;2.0906,1.6136,-1.6791;3.1276,.3601,.2168;1.7131,.3866,-.6398;.6094,.7372,.2888;1.6618,-.8544,-1.5031;1.0937,-2.4712,-1.3216;2.0254,-5.491,-6.2716;1.758,-5.0558,-5.3043;1.0564,-3.9134,-2.8488;1.724,-3.6752,-5.1583;1.4702,-5.8817,-4.2148;1.1339,-5.3044,-2.9968;1.3823,-3.0722,-3.9372;1.9554,-3.0084,-5.9927;1.5213,-6.9695,-4.3076;.9468,-5.9369,-2.1248;.6524,-3.3641,-1.6051;-.3471,-3.8473,-.8587;-.6891,-4.8505,-1.1264;-.3824,-3.5438,.5895;-.4121,-3.0669,3.3483;-.69,-4.5774,1.483;-.1104,-2.2664,1.0885;-.1224,-2.0299,2.4589;-.6965,-4.341,2.8566;-.8828,-5.5849,1.1042;.098,-1.4271,.4237;.1053,-1.0222,2.8162;-.9014,-5.1649,3.5463;-.41,-2.8856,4.4271;1.3344,-1.7364,-3.9083;1.4676,-1.3302,-3.006;.3403,3.7134,-1.0469;-2.1331,-2.9836,-1.7112;-2.9203,-3.1632,-.5696;-3.1129,-2.2902,.3642;-3.8403,-.7257,.6251;-4.7138,-.2581,-.956;-2.5309,.4521,1.2067;-5.071,-1.0692,1.9919;-3.4036,-4.3751,-.3368;-4.123,-4.616,.8627;-4.02,.0386,-1.7582;-5.3749,.6069,-.7659;-5.3401,-1.0881,-1.33;-1.6473,.5596,.5513;-2.1593,.145,2.1998;-3.0016,1.4471,1.313;-5.5326,-.1233,2.3291;-5.8844,-1.7387,1.6605;-4.5727,-1.5305,2.863;-5.0597,-4.0352,.8773;-3.5145,-4.3609,1.7441;-4.3521,-5.6897,.8554;4.2787,-2.1958,-.1722;4.1355,-3.2942,-1.0324;3.4911,-4.4524,-.6148;2.9951,-4.5073,.6823;3.1442,-3.448,1.5726;3.7793,-2.2922,1.1364;4.4917,-3.2238,-2.0634;3.349,-5.2932,-1.294;2.2572,-5.6951,1.1137;2.738,-3.5283,2.5819;3.8732,-1.4437,1.8157;-.4884,4.0187,.0408;-1.859,3.8045,-.0207;-2.3985,3.2838,-1.192;-1.6091,3.0023,-2.3043;-.2388,3.2149,-2.2228;-.0421,4.3824,.9696;-2.5067,4.013,.8314;-3.8336,2.9941,-1.2468;-2.0695,2.6071,-3.2104;.3935,2.9712,-3.0785;2.164,-5.9063,2.3019;1.7628,-6.3974,.2507;-4.3162,2.7111,-2.3222;-4.4612,3.036,-.2053;6.6243,.1625,-2.0244;5.9494,1.41,-1.8863;7.8044,.09,-2.8151;8.2824,1.1967,-3.4717;8.3191,-.8719,-2.9013;9.1875,1.1287,-4.0816;6.4529,2.5301,-2.6057;7.5875,2.4262,-3.3741;5.9221,3.4826,-2.55;7.953,3.3003,-3.9205;4.5811,3.9069,-.2534;3.763,5.0586,-.0604;5.9309,3.9602,.1956;6.4488,5.1057,.7507;6.5602,3.073,.1016;7.4888,5.1205,1.089;4.3314,6.2339,.5041;5.647,6.2635,.8954;3.6941,7.1143,.6328;6.0728,7.1712,1.3321;-2.3494,-3.9291,-2.876;-2.5284,-4.9661,-2.5529;-3.2234,-3.6063,-3.4732;-1.4746,-3.9191,-3.5453;-1.6968,-1.5944,-2.0919;-2.4341,-1.119,-2.7641;-1.532,-.9343,-1.2259;-.7472,-1.6364,-2.6498;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662927845064</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001700480361 0.000173224894 0.020153972596 0.005338463869</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057121086 -0.000406712 0.000012371 0.000232822 0.000339597 0.000389048 0.000404241 0.000523083 0.000652080 0.000811599 0.000940357 0.001009392 0.001170358 0.001268967 0.001412874 0.001438614 0.001646034 0.001824063 0.002101595 0.002374706 0.002566340 0.002745959 0.002887071 0.003499810 0.003593089 0.003880760 0.004365439 0.004665594 0.004869512 0.005084982 0.005189192 0.005329815 0.006100492 0.006431353 0.006629740 0.006977136 0.007207632 0.007585846 0.008178721 0.008711299 0.008880754 0.009552073 0.009850772 0.010184274 0.010978981 0.011203676 0.011883236 0.012561615 0.013362694 0.013760634 0.014018648 0.014631357 0.015009904 0.015474392 0.015863782 0.016612678 0.017107287 0.018600982 0.019005584 0.019456373 0.020359654 0.020641751 0.021554757 0.021873793 0.022474763 0.022787406 0.023498583 0.023826074 0.024518576 0.025883276 0.026617930 0.026879368 0.027227897 0.027555549 0.028213153 0.029083384 0.030899336 0.031525349 0.032168856 0.034104681 0.034658193 0.036022909 0.039055650 0.039539424 0.041988242 0.045407088 0.046156865 0.046915982 0.048868889 0.049693015 0.049908278 0.050824332 0.051537408 0.052186658 0.052288414 0.052413610 0.052852558 0.053578647 0.054930220 0.056094193 0.056421403 0.056721476 0.057013817 0.057289201 0.057766688 0.058590521 0.059239532 0.059732679 0.061356787 0.062055576 0.062912354 0.064231803 0.064563770 0.065054596 0.066014533 0.067501750 0.067964018 0.068967084 0.070515356 0.072155412 0.072636096 0.072905596 0.073388914 0.075220100 0.078733245 0.080857487 0.081697082 0.083351885 0.084572328 0.087904618 0.089006512 0.089399053 0.089837508 0.091311137 0.093319909 0.094581789 0.095491557 0.096203401 0.096860111 0.098501475 0.100143264 0.100698193 0.102711269 0.103812964 0.104239943 0.106496899 0.109031687 0.110936381 0.112275919 0.112825206 0.113839793 0.114762500 0.116953637 0.117194902 0.118634374 0.119307421 0.120587124 0.122297175 0.125173795 0.125793096 0.128517411 0.129009723 0.130988850 0.133674959 0.136366277 0.137736511 0.138652787 0.139630934 0.140546387 0.143521756 0.144699396 0.145933334 0.146793969 0.151987574 0.153634041 0.154288039 0.160817867 0.161365696 0.168542655 0.171458807 0.175973720 0.179095368 0.181611485 0.184428625 0.189102298 0.189869562 0.191871457 0.201301938 0.202221189 0.206291385 0.206964869 0.207266608 0.212354370 0.212578770 0.215579452 0.217050916 0.220426280 0.221029127 0.224549005 0.224966665 0.226476173 0.231855756 0.234549402 0.235548350 0.238557870 0.246446275 0.249241528 0.251957137 0.256554231 0.257221513 0.258283258 0.262566288 0.271576702 0.282905281 0.292019410 0.299970940 0.300165183 0.301050086 0.307128147 0.307784325 0.309849158 0.320064546 0.321363264 0.326454480 0.330199387 0.336609504 0.347760144 0.352024526 0.355649899 0.360846689 0.361709418 0.364137727 0.384533604 0.407059373 0.414443116 0.430270760 0.432170323 0.435276264 0.450896005 0.464652259 0.475629660 0.478835958 0.480401888 0.486667540 0.498898789 0.503942271 0.515189183 0.517971815 0.543791638 0.566927186 0.567686154 0.586602847 0.592187758 0.605752793 0.644255597 0.645401707 0.668029584 0.675677628 0.687375416 0.703932844 0.704360459 0.705994730 0.709765173 0.717220456 0.734040842 0.738010797 0.739751843 0.747594619 0.750799135 0.771612612 0.775984685 0.808998047 0.821829895 0.824077476 0.828932813 0.834283735 0.847259051 0.849444176 0.851399143 0.854543808 0.863310826 0.867471607 0.875887943 0.887496092 0.891134105 0.892467211 0.893579059 0.902085415 0.910283516 0.918099224 0.923877319 0.924634198 0.932006858 0.935689868 0.956046418 0.962967105 0.965220979 0.970114007 0.978259487 0.982588670 0.998644061 1.013003405 1.016098094 1.021878661 1.040197738 1.055091108 1.071171813 1.072641755 1.079478327 1.087380087 1.108454873 1.110424591 1.117699882 1.119002865 1.122619555 1.123897530 1.141872137 1.148981002 1.161761597 1.170176684 1.177225991 1.187327201 1.200762133 1.221832095 1.234002360 1.258145206 1.296472366 1.298320371 1.314737740 1.326481992 1.327539969 1.330237642 1.331395321 1.334795222 1.342334093 1.348861668 1.366458318 1.380003122 1.381325223 1.381841063 1.429560057 1.517363643 1.557997633 1.684749605 1.923028053</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">240</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91956716" y3="-0.95421247" z3="-0.68209299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60415518" y3="-1.95093351" z3="-1.54522513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08689635" y3="-0.99628184" z3="-1.40874951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77791636" y3="1.47782848" z3="-1.06549779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28857054" y3="0.31175464" z3="-0.50221942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65913651" y3="2.7388842" z3="-1.15881551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00801515" y3="2.73620568" z3="-0.85005128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38090028" y3="4.99543063" z3="-0.38230661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81143002" y3="3.85368613" z3="-0.89493422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75421164" y3="5.87136843" z3="-0.18467223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09452283" y3="1.61311337" z3="-1.68444842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12723906" y3="0.3591446" z3="0.21363453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71465332" y3="0.38594224" z3="-0.64603684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6090993" y3="0.73661315" z3="0.28030926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66518856" y3="-0.85488303" z3="-1.50956359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09276738" y3="-2.4701004" z3="-1.32623105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01171352" y3="-5.49146012" z3="-6.27699014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74671076" y3="-5.0560078" z3="-5.30933724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05158655" y3="-3.91302471" z3="-2.85240556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71357236" y3="-3.67547462" z3="-5.1634222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46100381" y3="-5.88152193" z3="-4.21918707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12785511" y3="-5.30392953" z3="-3.00049172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37496641" y3="-3.07224359" z3="-3.94174107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94345012" y3="-3.00905157" z3="-5.99829513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51121664" y3="-6.96922919" z3="-4.31193814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94234564" y3="-5.9361507" z3="-2.12811862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65091338" y3="-3.3637972" z3="-1.60765068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34765955" y3="-3.84597261" z3="-0.85940373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69075313" y3="-4.84912909" z3="-1.12602844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37999007" y3="-3.54207148" z3="0.58885367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41138162" y3="-3.06148416" z3="3.34616337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68728205" y3="-4.57541763" z3="1.48252981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10662503" y3="-2.2646917" z3="1.08746022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11840481" y3="-2.02711741" z3="2.45752856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69418617" y3="-4.33751439" z3="2.8556808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87878281" y3="-5.58476547" z3="1.10482892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.102053" y3="-1.42587828" z3="0.42259243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10914033" y3="-1.01860285" z3="2.81434334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90136014" y3="-5.16007198" z3="3.54422249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41052212" y3="-2.87807871" z3="4.4245516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32721723" y3="-1.73642672" z3="-3.91302376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46428137" y3="-1.33027854" z3="-3.01138991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34142675" y3="3.71175861" z3="-1.05485461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13481909" y3="-2.98126352" z3="-1.70863754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92069657" y3="-3.16205442" z3="-0.56626539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11177492" y3="-2.2904715" z3="0.36925543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84015693" y3="-0.72590565" z3="0.63082713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72284676" y3="-0.26323538" z3="-0.94576368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53067764" y3="0.45581991" z3="1.20230009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06307323" y3="-1.0689993" z3="2.00535882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40437509" y3="-4.37377025" z3="-0.33458095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.120618" y3="-4.61734599" z3="0.86726308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03354951" y3="0.02634018" z3="-1.75414566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37951557" y3="0.60505106" z3="-0.75580937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35432854" y3="-1.09334482" z3="-1.31054412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65021739" y3="0.56284085" z3="0.54276042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15403974" y3="0.15239995" z3="2.19468946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0026103" y3="1.45016418" z3="1.30792122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52340888" y3="-0.12305646" z3="2.3433282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87745826" y3="-1.74010445" z3="1.68066806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55883435" y3="-1.52857154" z3="2.87388595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05843588" y3="-4.03821712" z3="0.88463486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50959753" y3="-4.36237567" z3="1.74714486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34888998" y3="-5.69161975" z3="0.86033568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27960169" y3="-2.19560737" z3="-0.17378685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13424775" y3="-3.29230659" z3="-1.03548792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48970781" y3="-4.45096645" z3="-0.61870856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9956205" y3="-4.50780695" z3="0.67898912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14652613" y3="-3.44992964" z3="1.5705908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78163427" y3="-2.29361203" z3="1.13517002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48932492" y3="-3.22040003" z3="-2.06675806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34631764" y3="-5.29113298" z3="-1.29888533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25763454" y3="-5.69598124" z3="1.10978148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74156062" y3="-3.5316229" z3="2.58031121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87713519" y3="-1.44623297" z3="1.81551007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48986498" y3="4.0189718" z3="0.03084054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86002089" y3="3.80309801" z3="-0.03296101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39642369" y3="3.27803909" z3="-1.20361886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60447512" y3="2.99420158" z3="-2.3135037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23492689" y3="3.20962065" z3="-2.23069961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04586812" y3="4.38558363" z3="0.95965745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50963614" y3="4.01324032" z3="0.81722268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83111288" y3="2.98591015" z3="-1.26028099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06265754" y3="2.59563482" z3="-3.21950324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3997052" y3="2.96337798" z3="-3.08333491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1641493" y3="-5.90762713" z3="2.29774252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7630659" y3="-6.3978357" z3="0.24652225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31096747" y3="2.69537558" z3="-2.33481216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46103252" y3="3.03286269" z3="-0.22023217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62936558" y3="0.16393721" z3="-2.01937804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95388772" y3="1.41124559" z3="-1.88203555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81150054" y3="0.09227449" z3="-2.80701187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29111969" y3="1.19968495" z3="-3.46135555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32662376" y3="-0.8694392" z3="-2.89252715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1979578" y3="1.13233201" z3="-4.06871869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45904305" y3="2.53192256" z3="-2.59922031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59571649" y3="2.42897207" z3="-3.36464763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92793974" y3="3.48429967" z3="-2.54416781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96257192" y3="3.30354943" z3="-3.90932128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58076478" y3="3.90657911" z3="-0.25121113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76158578" y3="5.05756488" z3="-0.05960669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92895806" y3="3.96007792" z3="0.20221613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44457009" y3="5.10529585" z3="0.76004816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5587083" y3="3.07339745" z3="0.10996761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48319008" y3="5.12037118" z3="1.10210126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32787722" y3="6.23259761" z3="0.50758279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64207928" y3="6.26251469" z3="0.90302353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68985961" y3="7.1124919" z3="0.63488651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06612721" y3="7.16990594" z3="1.34196247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35295722" y3="-3.92518527" z3="-2.8745302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53256347" y3="-4.96218059" z3="-2.55252613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22692186" y3="-3.60064598" z3="-3.47012227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47919611" y3="-3.91549606" z3="-3.54521981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69820361" y3="-1.59213926" z3="-2.08768928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43608186" y3="-1.11608026" z3="-2.75870718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53295592" y3="-0.93320035" z3="-1.22088243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74999952" y3="-1.63304261" z3="-2.64691645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9196,-.9542,-.6821;6.6042,-1.9509,-1.5452;6.0869,-.9963,-1.4087;4.7779,1.4778,-1.0655;4.2886,.3118,-.5022;2.6591,2.7389,-1.1588;4.008,2.7362,-.8501;2.3809,4.9954,-.3823;1.8114,3.8537,-.8949;1.7542,5.8714,-.1847;2.0945,1.6131,-1.6844;3.1272,.3591,.2136;1.7147,.3859,-.646;.6091,.7366,.2803;1.6652,-.8549,-1.5096;1.0928,-2.4701,-1.3262;2.0117,-5.4915,-6.277;1.7467,-5.056,-5.3093;1.0516,-3.913,-2.8524;1.7136,-3.6755,-5.1634;1.461,-5.8815,-4.2192;1.1279,-5.3039,-3.0005;1.375,-3.0722,-3.9417;1.9435,-3.0091,-5.9983;1.5112,-6.9692,-4.3119;.9423,-5.9362,-2.1281;.6509,-3.3638,-1.6077;-.3477,-3.846,-.8594;-.6908,-4.8491,-1.126;-.38,-3.5421,.5889;-.4114,-3.0615,3.3462;-.6873,-4.5754,1.4825;-.1066,-2.2647,1.0875;-.1184,-2.0271,2.4575;-.6942,-4.3375,2.8557;-.8788,-5.5848,1.1048;.1021,-1.4259,.4226;.1091,-1.0186,2.8143;-.9014,-5.1601,3.5442;-.4105,-2.8781,4.4246;1.3272,-1.7364,-3.913;1.4643,-1.3303,-3.0114;.3414,3.7118,-1.0549;-2.1348,-2.9813,-1.7086;-2.9207,-3.1621,-.5663;-3.1118,-2.2905,.3693;-3.8402,-.7259,.6308;-4.7228,-.2632,-.9458;-2.5307,.4558,1.2023;-5.0631,-1.069,2.0054;-3.4044,-4.3738,-.3346;-4.1206,-4.6173,.8673;-4.0335,.0263,-1.7541;-5.3795,.6051,-.7558;-5.3543,-1.0933,-1.3105;-1.6502,.5628,.5428;-2.154,.1524,2.1947;-3.0026,1.4502,1.3079;-5.5234,-.1231,2.3433;-5.8775,-1.7401,1.6807;-4.5588,-1.5286,2.8739;-5.0584,-4.0382,.8846;-3.5096,-4.3624,1.7471;-4.3489,-5.6916,.8603;4.2796,-2.1956,-.1738;4.1342,-3.2923,-1.0355;3.4897,-4.451,-.6187;2.9956,-4.5078,.679;3.1465,-3.4499,1.5706;3.7816,-2.2936,1.1352;4.4893,-3.2204,-2.0668;3.3463,-5.2911,-1.2989;2.2576,-5.696,1.1098;2.7416,-3.5316,2.5803;3.8771,-1.4462,1.8155;-.4899,4.019,.0308;-1.86,3.8031,-.033;-2.3964,3.278,-1.2036;-1.6045,2.9942,-2.3135;-.2349,3.2096,-2.2307;-.0459,4.3856,.9597;-2.5096,4.0132,.8172;-3.8311,2.9859,-1.2603;-2.0627,2.5956,-3.2195;.3997,2.9634,-3.0833;2.1641,-5.9076,2.2977;1.7631,-6.3978,.2465;-4.311,2.6954,-2.3348;-4.461,3.0329,-.2202;6.6294,.1639,-2.0194;5.9539,1.4112,-1.882;7.8115,.0923,-2.807;8.2911,1.1997,-3.4614;8.3266,-.8694,-2.8925;9.198,1.1323,-4.0687;6.459,2.5319,-2.5992;7.5957,2.429,-3.3646;5.9279,3.4843,-2.5442;7.9626,3.3035,-3.9093;4.5808,3.9066,-.2512;3.7616,5.0576,-.0596;5.929,3.9601,.2022;6.4446,5.1053,.76;6.5587,3.0734,.11;7.4832,5.1204,1.1021;4.3279,6.2326,.5076;5.6421,6.2625,.903;3.6899,7.1125,.6349;6.0661,7.1699,1.342;-2.353,-3.9252,-2.8745;-2.5326,-4.9622,-2.5525;-3.2269,-3.6006,-3.4701;-1.4792,-3.9155,-3.5452;-1.6982,-1.5921,-2.0877;-2.4361,-1.1161,-2.7587;-1.533,-.9332,-1.2209;-.75,-1.633,-2.6469;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926077859</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001964820624 0.000206837906 0.020161159223 0.005323503552</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057104314 -0.000620777 0.000015590 0.000224619 0.000294973 0.000343909 0.000390923 0.000522629 0.000651850 0.000813155 0.000943918 0.001010994 0.001171830 0.001269461 0.001409436 0.001444544 0.001635155 0.001830843 0.002040271 0.002335091 0.002547691 0.002732561 0.002891396 0.003499227 0.003593852 0.003882906 0.004360248 0.004620654 0.004906310 0.005101698 0.005183058 0.005324614 0.006115456 0.006436079 0.006619836 0.006959053 0.007216190 0.007622050 0.008179015 0.008708012 0.008872460 0.009555676 0.009868646 0.010129381 0.010981468 0.011205366 0.011880838 0.012563606 0.013371911 0.013764558 0.014057262 0.014625605 0.014979873 0.015470882 0.015868163 0.016612617 0.016996746 0.018596210 0.019011772 0.019455765 0.020355549 0.020617744 0.021558403 0.021886076 0.022472799 0.022787074 0.023498562 0.023826573 0.024520190 0.025885974 0.026607990 0.026890901 0.027226900 0.027554397 0.028234171 0.029083887 0.030901446 0.031527504 0.032167103 0.034100702 0.034660520 0.036021513 0.039049541 0.039531099 0.041981150 0.045407683 0.046134698 0.046890585 0.048870520 0.049693936 0.049909020 0.050826077 0.051537560 0.052187041 0.052288470 0.052412260 0.052883676 0.053583640 0.054923231 0.056096472 0.056424178 0.056724250 0.057015848 0.057276734 0.057762697 0.058591792 0.059242198 0.059725890 0.061361127 0.062066019 0.062912304 0.064233929 0.064563940 0.065055047 0.065998200 0.067504504 0.067952778 0.068974972 0.070521893 0.072157610 0.072643471 0.072910279 0.073307532 0.075160500 0.078722043 0.080862435 0.081699233 0.083352590 0.084565538 0.087902885 0.089004792 0.089401863 0.089838971 0.091309701 0.093325865 0.094579583 0.095491884 0.096206160 0.096859095 0.098501356 0.100148502 0.100695423 0.102721489 0.103834415 0.104266765 0.106528716 0.109063013 0.110936598 0.112278186 0.112834874 0.113826701 0.114767362 0.116962688 0.117194514 0.118632705 0.119287807 0.120586815 0.122300216 0.125172654 0.125793348 0.128518990 0.129012552 0.130992053 0.133687594 0.136367702 0.137734318 0.138631472 0.139629260 0.140550945 0.143521620 0.144699110 0.145932740 0.146797547 0.151986616 0.153635586 0.154287770 0.160818206 0.161333590 0.168543815 0.171459783 0.175981924 0.179095826 0.181612823 0.184434767 0.189099367 0.189895380 0.191854505 0.201303527 0.202220346 0.206291936 0.206965315 0.207266637 0.212353683 0.212578101 0.215593581 0.217029072 0.220421134 0.221003057 0.224542387 0.225013452 0.226585615 0.231856991 0.234553994 0.235579730 0.238554822 0.246435599 0.249188317 0.251957783 0.256555664 0.257221407 0.258282752 0.262569099 0.271577882 0.282904479 0.292019365 0.299976562 0.300165936 0.301050378 0.307130194 0.307785195 0.309849850 0.320030431 0.321362349 0.326454985 0.330258813 0.336619838 0.347757794 0.352023791 0.355650153 0.360827528 0.361780707 0.364139700 0.384542821 0.407078529 0.414451967 0.430270950 0.432170849 0.435288317 0.450902011 0.464656347 0.475637478 0.478835436 0.480405105 0.486671182 0.498899136 0.503941455 0.515202507 0.517995265 0.543791473 0.566927324 0.567688525 0.586603185 0.592191909 0.605764077 0.644256812 0.645407411 0.668029518 0.675678048 0.687375415 0.703942259 0.704359592 0.705863768 0.709740204 0.717224604 0.734049349 0.738012686 0.739744756 0.747621342 0.750801054 0.771613174 0.775984918 0.809001013 0.821831712 0.824078983 0.828933974 0.834286581 0.847318730 0.849450922 0.851398168 0.854556145 0.863322534 0.867471823 0.875893207 0.887497477 0.891132754 0.892469634 0.893580691 0.902095379 0.910281400 0.918099034 0.923867822 0.924634721 0.932010101 0.935698386 0.956057268 0.962976618 0.965226623 0.970113138 0.978264771 0.982593546 0.998644581 1.012999939 1.016127048 1.021890087 1.040198731 1.055093372 1.071185885 1.072657955 1.079477785 1.087381218 1.108470876 1.110425781 1.117777812 1.119023933 1.122622541 1.123908522 1.141872430 1.148996918 1.161761755 1.170177622 1.177236062 1.187386820 1.200762117 1.221863677 1.234022699 1.258148995 1.296469934 1.298312411 1.314736974 1.326482057 1.327545316 1.330239219 1.331398353 1.334794200 1.342376027 1.348873878 1.366706614 1.379999991 1.381326212 1.381835214 1.429566805 1.517312311 1.557997733 1.684755758 1.923029066</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">241</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92475" y3="-0.95288911" z3="-0.68098245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60879748" y3="-1.94958952" z3="-1.5452518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09156562" y3="-0.99493658" z3="-1.40846687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78179045" y3="1.47904531" z3="-1.06535762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29331466" y3="0.31295308" z3="-0.50132111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66174988" y3="2.73759278" z3="-1.15934674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01055503" y3="2.7368231" z3="-0.85063236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38036788" y3="4.99393774" z3="-0.38346635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81256937" y3="3.85133089" z3="-0.89571446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75313368" y3="5.86868906" z3="-0.18990314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09868603" y3="1.6108725" z3="-1.68464115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13211847" y3="0.36007605" z3="0.21477635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71939914" y3="0.38466857" z3="-0.64487017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6135363" y3="0.73592264" z3="0.28084259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67087374" y3="-0.85724541" z3="-1.50688532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09504012" y3="-2.4727805" z3="-1.32408853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00405264" y3="-5.49067335" z3="-6.27939379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74110241" y3="-5.05548614" z3="-5.31102758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05036299" y3="-3.91300047" z3="-2.85259935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71058401" y3="-3.67484668" z3="-5.16415653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45542848" y3="-5.88141205" z3="-4.22102816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12454682" y3="-5.3040893" z3="-3.0015035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37438054" y3="-3.07197503" z3="-3.94161351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94062855" y3="-3.00820332" z3="-5.99894929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50373599" y3="-6.9692429" z3="-4.31460496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93883055" y3="-5.93656132" z3="-2.12919734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65026322" y3="-3.36358409" z3="-1.60770268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34959531" y3="-3.84502847" z3="-0.86013673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69417084" y3="-4.84729117" z3="-1.12810639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38294923" y3="-3.54244007" z3="0.5882958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4171018" y3="-3.06479604" z3="3.34715037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69875564" y3="-4.57411874" z3="1.48124051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10471877" y3="-2.26635634" z3="1.08792582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11907511" y3="-2.02927006" z3="2.45816929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70813944" y3="-4.33689158" z3="2.85466615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89676689" y3="-5.58042533" z3="1.10187381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10955381" y3="-1.42798356" z3="0.42382372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11405231" y3="-1.02313749" z3="2.81616245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91999119" y3="-5.15955457" z3="3.54421686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41761308" y3="-2.88287369" z3="4.42585349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32909481" y3="-1.73611271" z3="-3.91148633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4674928" y3="-1.33132594" z3="-3.00952839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34308008" y3="3.70731617" z3="-1.05693306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13356229" y3="-2.975786" z3="-1.70774289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92088769" y3="-3.16018803" z3="-0.56684986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1116343" y3="-2.29207712" z3="0.37210508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84004128" y3="-0.72916438" z3="0.63802269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73079118" y3="-0.2721975" z3="-0.9364628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52977749" y3="0.45682563" z3="1.20181286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05358236" y3="-1.07283782" z3="2.01968133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40634408" y3="-4.37271249" z3="-0.34115568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12969365" y3="-4.61901606" z3="0.85471734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0444562" y3="0.0123528" z3="-1.7492579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38536268" y3="0.59822012" z3="-0.74965756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36492374" y3="-1.10327617" z3="-1.29416403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65288031" y3="0.56550515" z3="0.53780197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14701586" y3="0.15655202" z3="2.19259523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00401548" y3="1.4501388" z3="1.30777512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51723288" y3="-0.12809322" z3="2.35718866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8661712" y3="-1.74908527" z3="1.70082922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54292283" y3="-1.52664789" z3="2.88782655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06791175" y3="-4.04030567" z3="0.86757513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52521755" y3="-4.36614928" z3="1.73929134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35645626" y3="-5.69338894" z3="0.84284133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28457345" y3="-2.19392909" z3="-0.17201637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13630544" y3="-3.29030336" z3="-1.03392795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48868886" y3="-4.44708944" z3="-0.61731677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99480784" y3="-4.50256963" z3="0.68055294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14954009" y3="-3.44549188" z3="1.57268682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78775224" y3="-2.2910902" z3="1.13746625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49096071" y3="-3.21913934" z3="-2.06545151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34235672" y3="-5.28636257" z3="-1.2978715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25349122" y3="-5.68875347" z3="1.11134692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74528439" y3="-3.52640803" z3="2.582749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88617031" y3="-1.44421563" z3="1.81820912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49025008" y3="4.01808402" z3="0.02563051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86015159" y3="3.80029698" z3="-0.03921071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39435566" y3="3.26993814" z3="-1.20853681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6004997" y3="2.98305154" z3="-2.31632806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2311024" y3="3.2000908" z3="-2.23179956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04812302" y3="4.3887685" z3="0.95362042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51111241" y3="4.01268665" z3="0.80935031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82811335" y3="2.97431137" z3="-1.26533853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05651242" y3="2.57965288" z3="-3.22100949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40491147" y3="2.95167199" z3="-3.08350679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15943548" y3="-5.90028113" z3="2.29957027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7574654" y3="-6.38945163" z3="0.24803261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30570352" y3="2.67730329" z3="-2.33917596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4597975" y3="3.02534112" z3="-0.2267609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63345625" y3="0.16538165" z3="-2.01949699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95771078" y3="1.41264837" z3="-1.88198939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81534713" y3="0.09391678" z3="-2.80758723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29461551" y3="1.20149766" z3="-3.46193244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3306355" y3="-0.86778004" z3="-2.8933913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2012919" y3="1.13425213" z3="-4.06961684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46261125" y3="2.53358279" z3="-2.59897519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59914842" y3="2.43085458" z3="-3.36468376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93149288" y3="3.48604717" z3="-2.54331086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96585269" y3="3.30566529" z3="-3.90911752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58142648" y3="3.90805384" z3="-0.25196011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76064472" y3="5.05796418" z3="-0.05998796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92991313" y3="3.96315339" z3="0.2007173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44421237" y3="5.1087353" z3="0.75887067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56113314" y3="3.07716753" z3="0.10649459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48329202" y3="5.12490014" z3="1.10016379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32554261" y3="6.23344743" z3="0.507687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63988688" y3="6.2647724" z3="0.90302676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68639682" y3="7.11257306" z3="0.63583808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06281451" y3="7.1724698" z3="1.3423474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35267781" y3="-3.91470802" z3="-2.87771632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53246324" y3="-4.95347038" z3="-2.56029089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22710208" y3="-3.5873625" z3="-3.47190687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47889458" y3="-3.90195108" z3="-3.54831095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69512182" y3="-1.58523135" z3="-2.08227725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43137175" y3="-1.10520798" z3="-2.75240587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52908001" y3="-0.92958115" z3="-1.21326089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7457519" y3="-1.62701141" z3="-2.64080513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9248,-.9529,-.681;6.6088,-1.9496,-1.5453;6.0916,-.9949,-1.4085;4.7818,1.479,-1.0654;4.2933,.313,-.5013;2.6617,2.7376,-1.1593;4.0106,2.7368,-.8506;2.3804,4.9939,-.3835;1.8126,3.8513,-.8957;1.7531,5.8687,-.1899;2.0987,1.6109,-1.6846;3.1321,.3601,.2148;1.7194,.3847,-.6449;.6135,.7359,.2808;1.6709,-.8572,-1.5069;1.095,-2.4728,-1.3241;2.0041,-5.4907,-6.2794;1.7411,-5.0555,-5.311;1.0504,-3.913,-2.8526;1.7106,-3.6748,-5.1642;1.4554,-5.8814,-4.221;1.1245,-5.3041,-3.0015;1.3744,-3.072,-3.9416;1.9406,-3.0082,-5.9989;1.5037,-6.9692,-4.3146;.9388,-5.9366,-2.1292;.6503,-3.3636,-1.6077;-.3496,-3.845,-.8601;-.6942,-4.8473,-1.1281;-.3829,-3.5424,.5883;-.4171,-3.0648,3.3472;-.6988,-4.5741,1.4812;-.1047,-2.2664,1.0879;-.1191,-2.0293,2.4582;-.7081,-4.3369,2.8547;-.8968,-5.5804,1.1019;.1096,-1.428,.4238;.1141,-1.0231,2.8162;-.92,-5.1596,3.5442;-.4176,-2.8829,4.4259;1.3291,-1.7361,-3.9115;1.4675,-1.3313,-3.0095;.3431,3.7073,-1.0569;-2.1336,-2.9758,-1.7077;-2.9209,-3.1602,-.5668;-3.1116,-2.2921,.3721;-3.84,-.7292,.638;-4.7308,-.2722,-.9365;-2.5298,.4568,1.2018;-5.0536,-1.0728,2.0197;-3.4063,-4.3727,-.3412;-4.1297,-4.619,.8547;-4.0445,.0124,-1.7493;-5.3854,.5982,-.7497;-5.3649,-1.1033,-1.2942;-1.6529,.5655,.5378;-2.147,.1566,2.1926;-3.004,1.4501,1.3078;-5.5172,-.1281,2.3572;-5.8662,-1.7491,1.7008;-4.5429,-1.5266,2.8878;-5.0679,-4.0403,.8676;-3.5252,-4.3661,1.7393;-4.3565,-5.6934,.8428;4.2846,-2.1939,-.172;4.1363,-3.2903,-1.0339;3.4887,-4.4471,-.6173;2.9948,-4.5026,.6806;3.1495,-3.4455,1.5727;3.7878,-2.2911,1.1375;4.491,-3.2191,-2.0655;3.3424,-5.2864,-1.2979;2.2535,-5.6888,1.1113;2.7453,-3.5264,2.5827;3.8862,-1.4442,1.8182;-.4903,4.0181,.0256;-1.8602,3.8003,-.0392;-2.3944,3.2699,-1.2085;-1.6005,2.9831,-2.3163;-.2311,3.2001,-2.2318;-.0481,4.3888,.9536;-2.5111,4.0127,.8094;-3.8281,2.9743,-1.2653;-2.0565,2.5797,-3.221;.4049,2.9517,-3.0835;2.1594,-5.9003,2.2996;1.7575,-6.3895,.248;-4.3057,2.6773,-2.3392;-4.4598,3.0253,-.2268;6.6335,.1654,-2.0195;5.9577,1.4126,-1.882;7.8153,.0939,-2.8076;8.2946,1.2015,-3.4619;8.3306,-.8678,-2.8934;9.2013,1.1343,-4.0696;6.4626,2.5336,-2.599;7.5991,2.4309,-3.3647;5.9315,3.486,-2.5433;7.9659,3.3057,-3.9091;4.5814,3.9081,-.252;3.7606,5.058,-.06;5.9299,3.9632,.2007;6.4442,5.1087,.7589;6.5611,3.0772,.1065;7.4833,5.1249,1.1002;4.3255,6.2334,.5077;5.6399,6.2648,.903;3.6864,7.1126,.6358;6.0628,7.1725,1.3423;-2.3527,-3.9147,-2.8777;-2.5325,-4.9535,-2.5603;-3.2271,-3.5874,-3.4719;-1.4789,-3.902,-3.5483;-1.6951,-1.5852,-2.0823;-2.4314,-1.1052,-2.7524;-1.5291,-.9296,-1.2133;-.7458,-1.627,-2.6408;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662920232711</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.002658490730 0.000275739813 0.022782220275 0.005266353331</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057104464 -0.000175867 0.000038063 0.000224581 0.000320700 0.000344759 0.000392258 0.000522668 0.000651816 0.000812953 0.000943980 0.001011016 0.001172007 0.001269489 0.001409597 0.001444597 0.001635201 0.001834093 0.002040255 0.002335017 0.002548977 0.002732548 0.002891328 0.003499523 0.003594883 0.003883621 0.004360503 0.004620135 0.004917035 0.005106806 0.005183554 0.005324056 0.006120730 0.006436244 0.006619951 0.006963717 0.007216761 0.007625840 0.008179046 0.008708644 0.008872943 0.009555730 0.009876602 0.010133715 0.010981502 0.011205763 0.011892434 0.012565744 0.013375559 0.013777837 0.014078185 0.014625755 0.014984792 0.015471612 0.015875152 0.016612627 0.017004064 0.018596155 0.019013182 0.019458289 0.020356101 0.020622865 0.021563690 0.021889084 0.022477468 0.022788387 0.023498561 0.023827222 0.024521507 0.025890083 0.026617112 0.026897749 0.027229687 0.027555305 0.028250794 0.029084203 0.030904876 0.031530755 0.032167395 0.034101813 0.034661194 0.036022671 0.039049545 0.039531532 0.041981879 0.045407964 0.046135013 0.046895014 0.048872829 0.049694938 0.049909678 0.050827111 0.051537611 0.052187727 0.052288591 0.052412343 0.052908539 0.053590178 0.054923576 0.056098844 0.056424845 0.056725523 0.057015851 0.057277891 0.057763056 0.058592924 0.059244427 0.059725900 0.061363352 0.062078711 0.062912885 0.064234796 0.064564378 0.065055675 0.065999531 0.067506675 0.067952978 0.068980343 0.070525633 0.072157447 0.072645431 0.072916271 0.073311866 0.075161405 0.078730055 0.080865824 0.081701552 0.083352638 0.084566780 0.087902038 0.089004656 0.089407253 0.089842908 0.091311211 0.093329713 0.094579699 0.095492796 0.096214543 0.096859134 0.098501438 0.100150034 0.100695957 0.102728715 0.103843303 0.104280631 0.106552223 0.109094357 0.110944182 0.112279938 0.112841560 0.113827444 0.114768586 0.116964014 0.117195362 0.118632778 0.119288649 0.120586986 0.122302008 0.125174942 0.125801310 0.128523292 0.129013454 0.130994039 0.133697938 0.136377109 0.137735141 0.138631608 0.139630927 0.140551276 0.143521691 0.144699411 0.145933456 0.146799372 0.151989126 0.153636766 0.154289021 0.160818332 0.161337305 0.168547644 0.171461649 0.176002646 0.179098141 0.181613209 0.184453961 0.189100403 0.189930510 0.191856714 0.201307729 0.202222140 0.206293255 0.206966075 0.207266648 0.212355405 0.212578346 0.215599637 0.217028933 0.220429338 0.221006877 0.224576784 0.225020336 0.226602670 0.231860065 0.234561442 0.235619415 0.238555128 0.246435755 0.249192551 0.251985270 0.256557510 0.257222540 0.258283656 0.262571203 0.271578799 0.282907707 0.292019413 0.300000721 0.300167182 0.301052199 0.307131806 0.307785932 0.309849959 0.320049487 0.321362360 0.326455583 0.330348891 0.336620138 0.347758192 0.352024185 0.355651167 0.360855338 0.361862018 0.364141993 0.384553332 0.407107921 0.414457292 0.430272235 0.432189989 0.435303722 0.450906429 0.464661542 0.475638181 0.478835468 0.480409548 0.486671609 0.498899875 0.503941705 0.515206803 0.518007553 0.543793995 0.566928702 0.567694054 0.586604205 0.592198021 0.605785508 0.644272604 0.645422271 0.668030505 0.675678213 0.687375692 0.703949297 0.704360529 0.705865230 0.709754275 0.717230590 0.734082031 0.738016429 0.739764966 0.747636132 0.750804166 0.771614216 0.775985233 0.809002625 0.821836160 0.824081095 0.828935150 0.834291054 0.847425407 0.849464172 0.851404441 0.854577014 0.863340204 0.867472569 0.875895059 0.887498051 0.891136105 0.892476868 0.893589222 0.902095552 0.910283117 0.918099670 0.923872206 0.924635084 0.932010221 0.935710237 0.956084460 0.962978982 0.965228550 0.970114290 0.978266575 0.982595624 0.998645953 1.013005789 1.016162095 1.021890260 1.040198992 1.055099356 1.071196169 1.072683741 1.079478770 1.087381727 1.108478499 1.110426258 1.117802959 1.119038658 1.122622545 1.123908691 1.141880616 1.149031929 1.161761849 1.170177734 1.177241684 1.187521376 1.200762175 1.221916874 1.234034052 1.258157942 1.296472428 1.298312627 1.314737409 1.326482095 1.327548237 1.330242446 1.331404603 1.334796607 1.342409868 1.348955313 1.367222215 1.380004675 1.381329868 1.381845949 1.429567670 1.517315084 1.557998581 1.684771431 1.923039792</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">242</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92821281" y3="-0.95272" z3="-0.67769759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61363335" y3="-1.94851175" z3="-1.54003661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09592986" y3="-0.99410399" z3="-1.403583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78436139" y3="1.47908807" z3="-1.06210526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29599974" y3="0.31273538" z3="-0.49857954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66341448" y3="2.73593717" z3="-1.16053865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01176468" y3="2.73636374" z3="-0.84938649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3793335" y3="4.99312411" z3="-0.38850372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81299886" y3="3.84957779" z3="-0.90060135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75075974" y3="5.8683671" z3="-0.19379547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10195441" y3="1.60818536" z3="-1.68514278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13390088" y3="0.35894793" z3="0.2160965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72228325" y3="0.38207098" z3="-0.64525548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61504285" y3="0.73240727" z3="0.27918008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67573054" y3="-0.85989316" z3="-1.5074345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09422094" y3="-2.47231095" z3="-1.32459906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99688062" y3="-5.48809875" z3="-6.28226949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73512115" y3="-5.0533107" z3="-5.31341794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04750913" y3="-3.91204389" z3="-2.85362848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70471935" y3="-3.67273702" z3="-5.16585256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45085967" y3="-5.87973905" z3="-4.22349629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1214566" y3="-5.30299897" z3="-3.00331828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37008304" y3="-3.07045533" z3="-3.94262996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93365492" y3="-3.00566989" z3="-6.00056639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49917942" y3="-6.96751743" z3="-4.31763021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93680612" y3="-5.93578646" z3="-2.13107752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64897245" y3="-3.36374943" z3="-1.60773638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35176526" y3="-3.8440382" z3="-0.86113736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69778558" y3="-4.84545128" z3="-1.13047321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38405877" y3="-3.544028" z3="0.58792873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41996537" y3="-3.07237144" z3="3.34684771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70074175" y3="-4.57795077" z3="1.47784373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10347466" y3="-2.27009951" z3="1.09098497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11771503" y3="-2.03704003" z3="2.46186286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70988464" y3="-4.34474146" z3="2.85174682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89851" y3="-5.58418444" z3="1.09636566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1124588" y3="-1.43039202" z3="0.42932291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11560325" y3="-1.03140066" z3="2.82258908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92436771" y3="-5.16820073" z3="3.53747081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4204773" y3="-2.89288069" z3="4.42593786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32463982" y3="-1.73447653" z3="-3.91180704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46621866" y3="-1.33050617" z3="-3.00982243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34371109" y3="3.70486625" z3="-1.06444001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13467551" y3="-2.97109793" z3="-1.7071249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92211938" y3="-3.15688997" z3="-0.56661225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10988488" y3="-2.29151682" z3="0.37537451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83841801" y3="-0.72852551" z3="0.64442161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73956973" y3="-0.27557044" z3="-0.92467843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52744922" y3="0.4610118" z3="1.19784606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04231336" y3="-1.07297376" z3="2.03520873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41065328" y3="-4.36841277" z3="-0.34399935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1322877" y3="-4.61650894" z3="0.85358677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05800476" y3="-0.00037165" z3="-1.74483095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38770764" y3="0.5997454" z3="-0.73759101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38112162" y3="-1.10575062" z3="-1.27188892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65454145" y3="0.57063578" z3="0.52901232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13818309" y3="0.16334398" z3="2.18702763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00333" y3="1.45333893" z3="1.30470886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50436128" y3="-0.1285151" z3="2.37510231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85645172" y3="-1.75066178" z3="1.72361144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52421724" y3="-1.52534659" z3="2.89934182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06895455" y3="-4.03569047" z3="0.86947794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52499244" y3="-4.3667386" z3="1.73758782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36251325" y3="-5.69012804" z3="0.83998378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2871681" y3="-2.19406451" z3="-0.17066036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1376363" y3="-3.28844691" z3="-1.03455293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48878277" y3="-4.44536565" z3="-0.6199856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99503188" y3="-4.50293877" z3="0.67782353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15068099" y3="-3.44765963" z3="1.57173624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78990704" y3="-2.29291583" z3="1.13845083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49239715" y3="-3.21556038" z3="-2.0658606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34135594" y3="-5.28316581" z3="-1.3020297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25250882" y3="-5.68900026" z3="1.10650426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74574656" y3="-3.52986945" z3="2.58141328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.888757" y3="-1.44710181" z3="1.8204375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49211941" y3="4.01977129" z3="0.01577724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86177898" y3="3.80115526" z3="-0.05155234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39300474" y3="3.26477962" z3="-1.21948397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59643879" y3="2.97283328" z3="-2.32382228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22768279" y3="3.19194245" z3="-2.23816741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05242014" y3="4.39505765" z3="0.9430308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51471842" y3="4.01705968" z3="0.79480353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82663248" y3="2.96777279" z3="-1.27802951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.050434" y3="2.56500337" z3="-3.22790434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41074709" y3="2.9388389" z3="-3.08584203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15668455" y3="-5.90128766" z3="2.29412384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75713532" y3="-6.38867023" z3="0.24202419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30174428" y3="2.66350652" z3="-2.35088369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46041826" y3="3.02454174" z3="-0.24080555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63795873" y3="0.16657284" z3="-2.01381475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96132487" y3="1.41334924" z3="-1.87731384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82066452" y3="0.09571864" z3="-2.80059492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30001532" y3="1.20338424" z3="-3.45467198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33647465" y3="-0.86562529" z3="-2.88570231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20729462" y3="1.13660802" z3="-4.06138422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46627872" y3="2.53424543" z3="-2.59426845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.6037039" y3="2.43211844" z3="-3.35862559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93444029" y3="3.48615601" z3="-2.54005051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97040363" y3="3.30693256" z3="-3.90298946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58109599" y3="3.90881228" z3="-0.25146536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75916983" y3="5.05832332" z3="-0.06291189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9285506" y3="3.96589772" z3="0.20370327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44083135" y3="5.11291456" z3="0.76070333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56039318" y3="3.08058799" z3="0.1133961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4790403" y3="5.13075024" z3="1.1040056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32196873" y3="6.23521202" z3="0.5037486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63549377" y3="6.26846393" z3="0.90121582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68184078" y3="7.11382443" z3="0.62887973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05686189" y3="7.17724415" z3="1.33971977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35490571" y3="-3.90682424" z3="-2.87927422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53587756" y3="-4.94598947" z3="-2.56471184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22888371" y3="-3.57670775" z3="-3.47207949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48142533" y3="-3.89364498" z3="-3.55017662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69464248" y3="-1.58063665" z3="-2.07750037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43154474" y3="-1.09848452" z3="-2.74529719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52718065" y3="-0.92760407" z3="-1.20685741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7467486" y3="-1.62078766" z3="-2.6374465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9282,-.9527,-.6777;6.6136,-1.9485,-1.54;6.0959,-.9941,-1.4036;4.7844,1.4791,-1.0621;4.296,.3127,-.4986;2.6634,2.7359,-1.1605;4.0118,2.7364,-.8494;2.3793,4.9931,-.3885;1.813,3.8496,-.9006;1.7508,5.8684,-.1938;2.102,1.6082,-1.6851;3.1339,.3589,.2161;1.7223,.3821,-.6453;.615,.7324,.2792;1.6757,-.8599,-1.5074;1.0942,-2.4723,-1.3246;1.9969,-5.4881,-6.2823;1.7351,-5.0533,-5.3134;1.0475,-3.912,-2.8536;1.7047,-3.6727,-5.1659;1.4509,-5.8797,-4.2235;1.1215,-5.303,-3.0033;1.3701,-3.0705,-3.9426;1.9337,-3.0057,-6.0006;1.4992,-6.9675,-4.3176;.9368,-5.9358,-2.1311;.649,-3.3637,-1.6077;-.3518,-3.844,-.8611;-.6978,-4.8455,-1.1305;-.3841,-3.544,.5879;-.42,-3.0724,3.3468;-.7007,-4.578,1.4778;-.1035,-2.2701,1.091;-.1177,-2.037,2.4619;-.7099,-4.3447,2.8517;-.8985,-5.5842,1.0964;.1125,-1.4304,.4293;.1156,-1.0314,2.8226;-.9244,-5.1682,3.5375;-.4205,-2.8929,4.4259;1.3246,-1.7345,-3.9118;1.4662,-1.3305,-3.0098;.3437,3.7049,-1.0644;-2.1347,-2.9711,-1.7071;-2.9221,-3.1569,-.5666;-3.1099,-2.2915,.3754;-3.8384,-.7285,.6444;-4.7396,-.2756,-.9247;-2.5274,.461,1.1978;-5.0423,-1.073,2.0352;-3.4107,-4.3684,-.344;-4.1323,-4.6165,.8536;-4.058,-.0004,-1.7448;-5.3877,.5997,-.7376;-5.3811,-1.1058,-1.2719;-1.6545,.5706,.529;-2.1382,.1633,2.187;-3.0033,1.4533,1.3047;-5.5044,-.1285,2.3751;-5.8565,-1.7507,1.7236;-4.5242,-1.5253,2.8993;-5.069,-4.0357,.8695;-3.525,-4.3667,1.7376;-4.3625,-5.6901,.84;4.2872,-2.1941,-.1707;4.1376,-3.2884,-1.0346;3.4888,-4.4454,-.62;2.995,-4.5029,.6778;3.1507,-3.4477,1.5717;3.7899,-2.2929,1.1385;4.4924,-3.2156,-2.0659;3.3414,-5.2832,-1.302;2.2525,-5.689,1.1065;2.7457,-3.5299,2.5814;3.8888,-1.4471,1.8204;-.4921,4.0198,.0158;-1.8618,3.8012,-.0516;-2.393,3.2648,-1.2195;-1.5964,2.9728,-2.3238;-.2277,3.1919,-2.2382;-.0524,4.3951,.943;-2.5147,4.0171,.7948;-3.8266,2.9678,-1.278;-2.0504,2.565,-3.2279;.4107,2.9388,-3.0858;2.1567,-5.9013,2.2941;1.7571,-6.3887,.242;-4.3017,2.6635,-2.3509;-4.4604,3.0245,-.2408;6.638,.1666,-2.0138;5.9613,1.4133,-1.8773;7.8207,.0957,-2.8006;8.3,1.2034,-3.4547;8.3365,-.8656,-2.8857;9.2073,1.1366,-4.0614;6.4663,2.5342,-2.5943;7.6037,2.4321,-3.3586;5.9344,3.4862,-2.5401;7.9704,3.3069,-3.903;4.5811,3.9088,-.2515;3.7592,5.0583,-.0629;5.9286,3.9659,.2037;6.4408,5.1129,.7607;6.5604,3.0806,.1134;7.479,5.1308,1.104;4.322,6.2352,.5037;5.6355,6.2685,.9012;3.6818,7.1138,.6289;6.0569,7.1772,1.3397;-2.3549,-3.9068,-2.8793;-2.5359,-4.946,-2.5647;-3.2289,-3.5767,-3.4721;-1.4814,-3.8936,-3.5502;-1.6946,-1.5806,-2.0775;-2.4315,-1.0985,-2.7453;-1.5272,-.9276,-1.2069;-.7467,-1.6208,-2.6374;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662921976713</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001115932750 0.000163832183 0.019675151668 0.005313525524</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057104468 -0.000216794 0.000072394 0.000225729 0.000295730 0.000342298 0.000392545 0.000522625 0.000651870 0.000814393 0.000944456 0.001011342 0.001172787 0.001270485 0.001409837 0.001444667 0.001636091 0.001831237 0.002038864 0.002335173 0.002547202 0.002740886 0.002892253 0.003499682 0.003594998 0.003883569 0.004360553 0.004621610 0.004918891 0.005108105 0.005183180 0.005324212 0.006129120 0.006436253 0.006620512 0.006962031 0.007216544 0.007629354 0.008179584 0.008710585 0.008873671 0.009555757 0.009881001 0.010133012 0.010982127 0.011206373 0.011897404 0.012566103 0.013378551 0.013786284 0.014088686 0.014625965 0.014988556 0.015471694 0.015877837 0.016613694 0.017011500 0.018596117 0.019013503 0.019459742 0.020356636 0.020622789 0.021565430 0.021890513 0.022482912 0.022788317 0.023498741 0.023827715 0.024521829 0.025893757 0.026625989 0.026900536 0.027231044 0.027555403 0.028266946 0.029084248 0.030909753 0.031532006 0.032172609 0.034102371 0.034662326 0.036024547 0.039049630 0.039531341 0.041983626 0.045407988 0.046135326 0.046896668 0.048873296 0.049695113 0.049909844 0.050828318 0.051537608 0.052188079 0.052288648 0.052412459 0.052918941 0.053595873 0.054924557 0.056099911 0.056425268 0.056725674 0.057016235 0.057279393 0.057763360 0.058592937 0.059244555 0.059725816 0.061364075 0.062085413 0.062912998 0.064234934 0.064564680 0.065056989 0.066003048 0.067506922 0.067953424 0.068982704 0.070526662 0.072157480 0.072645837 0.072920564 0.073311159 0.075162458 0.078734897 0.080867655 0.081702967 0.083352676 0.084567614 0.087901054 0.089005010 0.089409428 0.089845292 0.091313872 0.093331034 0.094579738 0.095493086 0.096219872 0.096859338 0.098501480 0.100150070 0.100696075 0.102728339 0.103842700 0.104281107 0.106555425 0.109104584 0.110948321 0.112281517 0.112842973 0.113827263 0.114768379 0.116964240 0.117195303 0.118633193 0.119288990 0.120587615 0.122303630 0.125175245 0.125814739 0.128530023 0.129013822 0.130995032 0.133706453 0.136394681 0.137735403 0.138632679 0.139632307 0.140551490 0.143521854 0.144699694 0.145933401 0.146801061 0.151989478 0.153638767 0.154289019 0.160819662 0.161338467 0.168553109 0.171462878 0.176013081 0.179098499 0.181613577 0.184463093 0.189101289 0.189958523 0.191857212 0.201309461 0.202223217 0.206293459 0.206966212 0.207266665 0.212358391 0.212578553 0.215600923 0.217029467 0.220434007 0.221010512 0.224586502 0.225026143 0.226622343 0.231862097 0.234566863 0.235649320 0.238556092 0.246436131 0.249204204 0.252006480 0.256558696 0.257223310 0.258284341 0.262572661 0.271578940 0.282912221 0.292019903 0.300013008 0.300168537 0.301055440 0.307132551 0.307786110 0.309850041 0.320062124 0.321362384 0.326456014 0.330393878 0.336620209 0.347758361 0.352024305 0.355651423 0.360870411 0.361894770 0.364142795 0.384555757 0.407127562 0.414458181 0.430272501 0.432193976 0.435305633 0.450910559 0.464666833 0.475639087 0.478835513 0.480415000 0.486673698 0.498900084 0.503943744 0.515207068 0.518022288 0.543795304 0.566929498 0.567698614 0.586604383 0.592205239 0.605800278 0.644273257 0.645441760 0.668031633 0.675678398 0.687375716 0.703975207 0.704360522 0.705865755 0.709763581 0.717235789 0.734093397 0.738019521 0.739773436 0.747638974 0.750805240 0.771614665 0.775985464 0.809002653 0.821839056 0.824082520 0.828935491 0.834293395 0.847494726 0.849465646 0.851404562 0.854583231 0.863351397 0.867472680 0.875895843 0.887498380 0.891143043 0.892481162 0.893589208 0.902096437 0.910285351 0.918100901 0.923873728 0.924635614 0.932010221 0.935722335 0.956093667 0.962981470 0.965230573 0.970116459 0.978272627 0.982596340 0.998646581 1.013006202 1.016178317 1.021891651 1.040199180 1.055104034 1.071203000 1.072686041 1.079479487 1.087381746 1.108484651 1.110426645 1.117830095 1.119047716 1.122622556 1.123908900 1.141882937 1.149052818 1.161762008 1.170177870 1.177245379 1.187597397 1.200762223 1.221934394 1.234043425 1.258169656 1.296481396 1.298312796 1.314739048 1.326482152 1.327549595 1.330245905 1.331404643 1.334796593 1.342414288 1.348967639 1.367349187 1.380004802 1.381331096 1.381846146 1.429567918 1.517321781 1.557998984 1.684781098 1.923040790</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">243</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92615917" y3="-0.95390375" z3="-0.67447832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61386148" y3="-1.94942534" z3="-1.53275525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09591294" y3="-0.99500876" z3="-1.39719184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78376033" y3="1.47818685" z3="-1.05766361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29387703" y3="0.31160833" z3="-0.49582817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66319708" y3="2.73520585" z3="-1.16131841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01072637" y3="2.73556624" z3="-0.84690318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37814324" y3="4.99408264" z3="-0.39431641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81266502" y3="3.84966258" z3="-0.90519846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75007051" y3="5.86968296" z3="-0.2066364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10266946" y3="1.60737334" z3="-1.68674769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13028861" y3="0.35767241" z3="0.21652006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72053688" y3="0.38136642" z3="-0.64777892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61124789" y3="0.73202913" z3="0.27405081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67577742" y3="-0.86035703" z3="-1.51026086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.093334" y3="-2.47113845" z3="-1.32717196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99007561" y3="-5.48322505" z3="-6.28834086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72937311" y3="-5.04900469" z3="-5.31893717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04432751" y3="-3.90913876" z3="-2.85772688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69779209" y3="-3.6685341" z3="-5.1709725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44772602" y3="-5.87597619" z3="-4.22875095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11954735" y3="-5.29994565" z3="-3.00786493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36451537" y3="-3.06702591" z3="-3.94702255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92476542" y3="-3.00104263" z3="-6.00588614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49708195" y3="-6.96363429" z3="-4.32324905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93688343" y3="-5.93318326" z3="-2.13553096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64683676" y3="-3.36123939" z3="-1.61129756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35255821" y3="-3.84283856" z3="-0.86324148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69839297" y3="-4.84421259" z3="-1.13294048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3823531" y3="-3.54491671" z3="0.5863722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41070365" y3="-3.07801033" z3="3.34677235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69181454" y3="-4.58114598" z3="1.47583058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10693831" y3="-2.26973285" z3="1.09028706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11853025" y3="-2.03836811" z3="2.46153501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69789485" y3="-4.34952241" z3="2.85012539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88695339" y3="-5.58698392" z3="1.09307084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10312404" y3="-1.42782927" z3="0.42929475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11179448" y3="-1.03287569" z3="2.82348582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90469256" y3="-5.17564157" z3="3.53641861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40895954" y3="-2.9000968" z3="4.42606536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31787829" y3="-1.73117122" z3="-3.9153557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46157954" y3="-1.32822656" z3="-3.01332369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34387815" y3="3.7048431" z3="-1.07210299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13680293" y3="-2.97060891" z3="-1.70514729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92167895" y3="-3.15532513" z3="-0.56252755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10850116" y3="-2.28806699" z3="0.37792851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83734666" y3="-0.7259799" z3="0.64881135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74492696" y3="-0.27400453" z3="-0.91718102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52579944" y3="0.46545848" z3="1.1976181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03422381" y3="-1.07063859" z3="2.04499801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40818478" y3="-4.36715923" z3="-0.33676051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12563413" y3="-4.61434233" z3="0.86266319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06693416" y3="-0.00645027" z3="-1.74312943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38495302" y3="0.60706487" z3="-0.72814874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.39555906" y3="-1.10044675" z3="-1.25660659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65366546" y3="0.57377541" z3="0.52755923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13493854" y3="0.17004652" z3="2.18687416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00196441" y3="1.45778945" z3="1.30341825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49413797" y3="-0.12653815" z3="2.38908001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85031451" y3="-1.74758921" z3="1.73695117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.51168135" y3="-1.52446114" z3="2.90596934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.061422" y3="-4.03183712" z3="0.88299302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51462111" y3="-4.36685787" z3="1.74426738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35713427" y3="-5.68779739" z3="0.848996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2840567" y3="-2.19594022" z3="-0.17027103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13677965" y3="-3.28942926" z3="-1.03590854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48906921" y3="-4.44783154" z3="-0.6237062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99440824" y3="-4.50790043" z3="0.67369846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1470472" y3="-3.45334948" z3="1.56901731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78495417" y3="-2.29706681" z3="1.13796305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4928094" y3="-3.21469302" z3="-2.06668474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34383285" y3="-5.28520141" z3="-1.30695118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25522899" y3="-5.69674635" z3="1.1007604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74142758" y3="-3.53777032" z3="2.57826546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88192827" y3="-1.45217189" z3="1.82120257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49402137" y3="4.0226426" z3="0.00525503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86351086" y3="3.8036342" z3="-0.06384369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39254444" y3="3.2644751" z3="-1.23136441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59410174" y3="2.9706133" z3="-2.33392922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22532818" y3="3.18948271" z3="-2.24584231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0560455" y3="4.40028384" z3="0.93225326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51804315" y3="4.02138493" z3="0.78076767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82579299" y3="2.96666347" z3="-1.29129786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04639747" y3="2.56082449" z3="-3.23769451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41455754" y3="2.93480461" z3="-3.092395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16193096" y3="-5.91231795" z3="2.28831764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76015162" y3="-6.39551082" z3="0.23529516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29876651" y3="2.65850983" z3="-2.36402487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46157358" y3="3.0271852" z3="-0.25558295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6397614" y3="0.16589483" z3="-2.00531873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96266594" y3="1.41261487" z3="-1.8702015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82469527" y3="0.09528049" z3="-2.78884475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30557719" y3="1.20305868" z3="-3.44161138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34097673" y3="-0.8659689" z3="-2.87253557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21457222" y3="1.13648619" z3="-4.04585334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46925763" y3="2.53365293" z3="-2.58581829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60865353" y3="2.4316751" z3="-3.34737858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93715793" y3="3.48561536" z3="-2.53275949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97648595" y3="3.30654548" z3="-3.89090172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5786739" y3="3.90870659" z3="-0.24902087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75691632" y3="5.0592178" z3="-0.06478963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92512515" y3="3.96563155" z3="0.20939412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43678254" y3="5.11338874" z3="0.76571328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55687594" y3="3.07940838" z3="0.12084355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47430359" y3="5.1310759" z3="1.11147365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31917304" y3="6.23693271" z3="0.50099576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63173001" y3="6.26990899" z3="0.90195447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6793599" y3="7.11654186" z3="0.62291161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05260786" y3="7.17939113" z3="1.3396816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35946593" y3="-3.9079857" z3="-2.87555937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53900815" y3="-4.94684608" z3="-2.55882482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23507" y3="-3.57953128" z3="-3.46710331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48736452" y3="-3.89519521" z3="-3.54836441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69842713" y3="-1.57992601" z3="-2.07898969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4361517" y3="-1.09862469" z3="-2.74648921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52980081" y3="-0.92546412" z3="-1.20969673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75064761" y3="-1.62134912" z3="-2.6399075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9262,-.9539,-.6745;6.6139,-1.9494,-1.5328;6.0959,-.995,-1.3972;4.7838,1.4782,-1.0577;4.2939,.3116,-.4958;2.6632,2.7352,-1.1613;4.0107,2.7356,-.8469;2.3781,4.9941,-.3943;1.8127,3.8497,-.9052;1.7501,5.8697,-.2066;2.1027,1.6074,-1.6867;3.1303,.3577,.2165;1.7205,.3814,-.6478;.6112,.732,.2741;1.6758,-.8604,-1.5103;1.0933,-2.4711,-1.3272;1.9901,-5.4832,-6.2883;1.7294,-5.049,-5.3189;1.0443,-3.9091,-2.8577;1.6978,-3.6685,-5.171;1.4477,-5.876,-4.2288;1.1195,-5.2999,-3.0079;1.3645,-3.067,-3.947;1.9248,-3.001,-6.0059;1.4971,-6.9636,-4.3232;.9369,-5.9332,-2.1355;.6468,-3.3612,-1.6113;-.3526,-3.8428,-.8632;-.6984,-4.8442,-1.1329;-.3824,-3.5449,.5864;-.4107,-3.078,3.3468;-.6918,-4.5811,1.4758;-.1069,-2.2697,1.0903;-.1185,-2.0384,2.4615;-.6979,-4.3495,2.8501;-.887,-5.587,1.0931;.1031,-1.4278,.4293;.1118,-1.0329,2.8235;-.9047,-5.1756,3.5364;-.409,-2.9001,4.4261;1.3179,-1.7312,-3.9154;1.4616,-1.3282,-3.0133;.3439,3.7048,-1.0721;-2.1368,-2.9706,-1.7051;-2.9217,-3.1553,-.5625;-3.1085,-2.2881,.3779;-3.8373,-.726,.6488;-4.7449,-.274,-.9172;-2.5258,.4655,1.1976;-5.0342,-1.0706,2.045;-3.4082,-4.3672,-.3368;-4.1256,-4.6143,.8627;-4.0669,-.0065,-1.7431;-5.385,.6071,-.7281;-5.3956,-1.1004,-1.2566;-1.6537,.5738,.5276;-2.1349,.17,2.1869;-3.002,1.4578,1.3034;-5.4941,-.1265,2.3891;-5.8503,-1.7476,1.737;-4.5117,-1.5245,2.906;-5.0614,-4.0318,.883;-3.5146,-4.3669,1.7443;-4.3571,-5.6878,.849;4.2841,-2.1959,-.1703;4.1368,-3.2894,-1.0359;3.4891,-4.4478,-.6237;2.9944,-4.5079,.6737;3.147,-3.4533,1.569;3.785,-2.2971,1.138;4.4928,-3.2147,-2.0667;3.3438,-5.2852,-1.307;2.2552,-5.6967,1.1008;2.7414,-3.5378,2.5783;3.8819,-1.4522,1.8212;-.494,4.0226,.0053;-1.8635,3.8036,-.0638;-2.3925,3.2645,-1.2314;-1.5941,2.9706,-2.3339;-.2253,3.1895,-2.2458;-.056,4.4003,.9323;-2.518,4.0214,.7808;-3.8258,2.9667,-1.2913;-2.0464,2.5608,-3.2377;.4146,2.9348,-3.0924;2.1619,-5.9123,2.2883;1.7602,-6.3955,.2353;-4.2988,2.6585,-2.364;-4.4616,3.0272,-.2556;6.6398,.1659,-2.0053;5.9627,1.4126,-1.8702;7.8247,.0953,-2.7888;8.3056,1.2031,-3.4416;8.341,-.866,-2.8725;9.2146,1.1365,-4.0459;6.4693,2.5337,-2.5858;7.6087,2.4317,-3.3474;5.9372,3.4856,-2.5328;7.9765,3.3065,-3.8909;4.5787,3.9087,-.249;3.7569,5.0592,-.0648;5.9251,3.9656,.2094;6.4368,5.1134,.7657;6.5569,3.0794,.1208;7.4743,5.1311,1.1115;4.3192,6.2369,.501;5.6317,6.2699,.902;3.6794,7.1165,.6229;6.0526,7.1794,1.3397;-2.3595,-3.908,-2.8756;-2.539,-4.9468,-2.5588;-3.2351,-3.5795,-3.4671;-1.4874,-3.8952,-3.5484;-1.6984,-1.5799,-2.079;-2.4362,-1.0986,-2.7465;-1.5298,-.9255,-1.2097;-.7506,-1.6213,-2.6399;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662922573758</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001330368676 0.000171177718 0.026756390311 0.005321997155</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057104188 -0.000054166 0.000036778 0.000232660 0.000308974 0.000346519 0.000392842 0.000522725 0.000651704 0.000814385 0.000944580 0.001011120 0.001172624 0.001275361 0.001409978 0.001445128 0.001636721 0.001830177 0.002038689 0.002334965 0.002546376 0.002744926 0.002891989 0.003500687 0.003595566 0.003882550 0.004360705 0.004623009 0.004920020 0.005107922 0.005183498 0.005324302 0.006129448 0.006436343 0.006620425 0.006962695 0.007216963 0.007632018 0.008180375 0.008711458 0.008874395 0.009555840 0.009881947 0.010132956 0.010982445 0.011207304 0.011900190 0.012566374 0.013379579 0.013790077 0.014095087 0.014627088 0.014989432 0.015471921 0.015880592 0.016615449 0.017016888 0.018596115 0.019013906 0.019460522 0.020357196 0.020622898 0.021567407 0.021891479 0.022486549 0.022788395 0.023498701 0.023828042 0.024522183 0.025896554 0.026634942 0.026902606 0.027232592 0.027555638 0.028280930 0.029084390 0.030914793 0.031533017 0.032171131 0.034102541 0.034663600 0.036027404 0.039050033 0.039531101 0.041984237 0.045408125 0.046135821 0.046898213 0.048873935 0.049695174 0.049910020 0.050828422 0.051537627 0.052188288 0.052288648 0.052412491 0.052925716 0.053599455 0.054925461 0.056100754 0.056425863 0.056725824 0.057016672 0.057279702 0.057763231 0.058593076 0.059244602 0.059726065 0.061364707 0.062089664 0.062913491 0.064235263 0.064564951 0.065058054 0.066004299 0.067507118 0.067953422 0.068984105 0.070527462 0.072157363 0.072645973 0.072924896 0.073311517 0.075165369 0.078736495 0.080868325 0.081704804 0.083352711 0.084567590 0.087901159 0.089005314 0.089410802 0.089847437 0.091315927 0.093331669 0.094579805 0.095493262 0.096222512 0.096859362 0.098501531 0.100150190 0.100696142 0.102728371 0.103842500 0.104280825 0.106558099 0.109110946 0.110950899 0.112283234 0.112843516 0.113827230 0.114768673 0.116965832 0.117195603 0.118633482 0.119289235 0.120587709 0.122306080 0.125175478 0.125822230 0.128533228 0.129013864 0.130995476 0.133709889 0.136410070 0.137735838 0.138632664 0.139633914 0.140551716 0.143521861 0.144699721 0.145933488 0.146801272 0.151989878 0.153640280 0.154289373 0.160819472 0.161339258 0.168556789 0.171463518 0.176022796 0.179100235 0.181613868 0.184467920 0.189103537 0.189985441 0.191856914 0.201313016 0.202224694 0.206293643 0.206966274 0.207266683 0.212360653 0.212578546 0.215601223 0.217032774 0.220437026 0.221011136 0.224600861 0.225027060 0.226623579 0.231864456 0.234571228 0.235681198 0.238556120 0.246437873 0.249204788 0.252031341 0.256559010 0.257224094 0.258285290 0.262573239 0.271578947 0.282915322 0.292021068 0.300019671 0.300169024 0.301057454 0.307134122 0.307786121 0.309850085 0.320069055 0.321362408 0.326457262 0.330430144 0.336621236 0.347758604 0.352024629 0.355651905 0.360879374 0.361913168 0.364143333 0.384558854 0.407147511 0.414465532 0.430272627 0.432193681 0.435310143 0.450914682 0.464674791 0.475639204 0.478835745 0.480417857 0.486673629 0.498900184 0.503944155 0.515207599 0.518023566 0.543798556 0.566931200 0.567703124 0.586605226 0.592207000 0.605814496 0.644277939 0.645461506 0.668031720 0.675679679 0.687375768 0.703987763 0.704360542 0.705866885 0.709783020 0.717239407 0.734100045 0.738021910 0.739773608 0.747651804 0.750806704 0.771615109 0.775985868 0.809004001 0.821841171 0.824082655 0.828936887 0.834294698 0.847554904 0.849471378 0.851404658 0.854588080 0.863363562 0.867472885 0.875898856 0.887498817 0.891146360 0.892484995 0.893590462 0.902097905 0.910285399 0.918102332 0.923875035 0.924635840 0.932010439 0.935735701 0.956104047 0.962981652 0.965231430 0.970116623 0.978274395 0.982597834 0.998647838 1.013006238 1.016184706 1.021891666 1.040200950 1.055108550 1.071204368 1.072690382 1.079481211 1.087381942 1.108484709 1.110426791 1.117830153 1.119048797 1.122622889 1.123911678 1.141885875 1.149069744 1.161762023 1.170180661 1.177255064 1.187682833 1.200762260 1.221963129 1.234043967 1.258178659 1.296483226 1.298313166 1.314739747 1.326482559 1.327549721 1.330248848 1.331404607 1.334796841 1.342416915 1.348993680 1.367485419 1.380005460 1.381331837 1.381847891 1.429569059 1.517328192 1.557999183 1.684789683 1.923043324</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">244</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92192501" y3="-0.95509768" z3="-0.67584861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61095872" y3="-1.95078469" z3="-1.53133112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09317156" y3="-0.9962163" z3="-1.39616023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78175093" y3="1.47737231" z3="-1.05684173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28976802" y3="0.31046147" z3="-0.49750765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66270214" y3="2.73668318" z3="-1.16332634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0095731" y3="2.73522553" z3="-0.84614486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37840171" y3="4.99461701" z3="-0.39349879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8126316" y3="3.85136667" z3="-0.90687962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75025397" y3="5.87081221" z3="-0.20218594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10227046" y3="1.61007682" z3="-1.69147657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12456952" y3="0.35621286" z3="0.21219497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71668933" y3="0.38301854" z3="-0.65506246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60616097" y3="0.73398452" z3="0.26528663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67184637" y3="-0.85750169" z3="-1.51935359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09070654" y3="-2.46797805" z3="-1.3324401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98300284" y3="-5.48661896" z3="-6.29054743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7234978" y3="-5.0513749" z3="-5.32121066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04147551" y3="-3.90902386" z3="-2.86018481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68908584" y3="-3.67064278" z3="-5.1754623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44620821" y3="-5.87728023" z3="-4.22894865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11945017" y3="-5.29998947" z3="-3.00820468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3573127" y3="-3.06786121" z3="-3.9516266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91264321" y3="-3.00394158" z3="-6.01204412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49786238" y3="-6.96505994" z3="-4.32176695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94007705" y3="-5.93224597" z3="-2.13433992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64569705" y3="-3.36028944" z3="-1.61347176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35148912" y3="-3.84167993" z3="-0.86308256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69616306" y3="-4.84432375" z3="-1.12974108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37853928" y3="-3.53986205" z3="0.5859722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39564391" y3="-3.06650846" z3="3.34515024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6783719" y3="-4.57574685" z3="1.47935153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10634714" y3="-2.26286709" z3="1.0857053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11162875" y3="-2.02880839" z3="2.45655601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67796137" y3="-4.34162174" z3="2.85332721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86975276" y3="-5.5840322" z3="1.10029719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09631215" y3="-1.4216203" z3="0.42167792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11504838" y3="-1.02068252" z3="2.81456038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87793617" y3="-5.16674293" z3="3.54166488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38855394" y3="-2.88626121" z3="4.42418848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30772403" y3="-1.73189306" z3="-3.92215031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45375791" y3="-1.32707345" z3="-3.02124258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34371288" y3="3.7075138" z3="-1.07419601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13984534" y3="-2.97461918" z3="-1.70502103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92176562" y3="-3.15742292" z3="-0.5602576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10915496" y3="-2.28784801" z3="0.37768909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83805143" y3="-0.72520978" z3="0.64572026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74205323" y3="-0.27021015" z3="-0.9211207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52668842" y3="0.46416158" z3="1.19839469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0399615" y3="-1.06965903" z3="2.03828116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40446277" y3="-4.36951578" z3="-0.32893134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11599693" y3="-4.61458637" z3="0.87498081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06312427" y3="-0.00205627" z3="-1.74591929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38149425" y3="0.61112874" z3="-0.73113297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3931088" y3="-1.09522723" z3="-1.2630732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65139628" y3="0.56983141" z3="0.53207598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14127599" y3="0.16866071" z3="2.18979284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0008956" y3="1.45793383" z3="1.30101775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49804678" y3="-0.12487166" z3="2.38272229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8571878" y3="-1.74382191" z3="1.72675792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52070737" y3="-1.52643458" z3="2.89939466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05211585" y3="-4.03310177" z3="0.89812908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50094209" y3="-4.36335977" z3="1.75300981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34659038" y3="-5.68804505" z3="0.86535128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27942001" y3="-2.19739974" z3="-0.17292092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13375153" y3="-3.29062101" z3="-1.03898498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48810291" y3="-4.45021716" z3="-0.62706003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9942971" y3="-4.51192126" z3="0.67057707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14459019" y3="-3.45726993" z3="1.56604473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77987331" y3="-2.29946017" z3="1.13506024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48973984" y3="-3.21486921" z3="-2.06967259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34389603" y3="-5.28727855" z3="-1.31062241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25796396" y3="-5.70230832" z3="1.09735175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73920344" y3="-3.54258767" z3="2.57532757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8746926" y3="-1.45413991" z3="1.81826216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49373566" y3="4.02219591" z3="0.00465283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86317394" y3="3.80326603" z3="-0.06454879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39251607" y3="3.26700982" z3="-1.23320374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59443802" y3="2.976013" z3="-2.33666774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22581322" y3="3.19516191" z3="-2.24894794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05538616" y3="4.39727062" z3="0.9325653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51744047" y3="4.01895005" z3="0.78071677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82594805" y3="2.96984088" z3="-1.29352833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04720914" y3="2.56886317" z3="-3.24149767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41387771" y3="2.94262357" z3="-3.09589915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16666009" y3="-5.91913413" z3="2.28458135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76268981" y3="-6.40092309" z3="0.23189011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.2993842" y3="2.66429848" z3="-2.3668075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46145655" y3="3.02851403" z3="-0.25749388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63900455" y3="0.16492728" z3="-2.00197568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96246178" y3="1.41197622" z3="-1.86679354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82564188" y3="0.0943073" z3="-2.78300591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30888236" y3="1.20257751" z3="-3.43319127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3413492" y3="-0.8673192" z3="-2.86683816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21922617" y3="1.13604038" z3="-4.03548956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47150038" y3="2.53353801" z3="-2.57987147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61263311" y3="2.4316618" z3="-3.33889541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93994328" y3="3.48582322" z3="-2.52693238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98240829" y3="3.30700259" z3="-3.88035458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57776491" y3="3.90702517" z3="-0.24581196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75686267" y3="5.0580991" z3="-0.06219244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92305324" y3="3.9622308" z3="0.21582171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4346201" y3="5.10909345" z3="0.77390263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55375272" y3="3.0756611" z3="0.12942432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47115315" y3="5.12551643" z3="1.12219331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31899623" y3="6.23484063" z3="0.50552824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63068012" y3="6.26634156" z3="0.90898447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67977555" y3="7.11481172" z3="0.62657303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05154337" y3="7.17509395" z3="1.34811763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36218587" y3="-3.91651745" z3="-2.87160962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53897043" y3="-4.95442961" z3="-2.55075055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23949944" y3="-3.59209674" z3="-3.46262442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49125218" y3="-3.9043113" z3="-3.54593099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70469906" y3="-1.58481156" z3="-2.08342447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44417595" y3="-1.10818071" z3="-2.752367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53761982" y3="-0.92657036" z3="-1.21654489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75743909" y3="-1.62498309" z3="-2.6446709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9219,-.9551,-.6758;6.611,-1.9508,-1.5313;6.0932,-.9962,-1.3962;4.7818,1.4774,-1.0568;4.2898,.3105,-.4975;2.6627,2.7367,-1.1633;4.0096,2.7352,-.8461;2.3784,4.9946,-.3935;1.8126,3.8514,-.9069;1.7503,5.8708,-.2022;2.1023,1.6101,-1.6915;3.1246,.3562,.2122;1.7167,.383,-.6551;.6062,.734,.2653;1.6718,-.8575,-1.5194;1.0907,-2.468,-1.3324;1.983,-5.4866,-6.2905;1.7235,-5.0514,-5.3212;1.0415,-3.909,-2.8602;1.6891,-3.6706,-5.1755;1.4462,-5.8773,-4.2289;1.1195,-5.3,-3.0082;1.3573,-3.0679,-3.9516;1.9126,-3.0039,-6.012;1.4979,-6.9651,-4.3218;.9401,-5.9322,-2.1343;.6457,-3.3603,-1.6135;-.3515,-3.8417,-.8631;-.6962,-4.8443,-1.1297;-.3785,-3.5399,.586;-.3956,-3.0665,3.3452;-.6784,-4.5757,1.4794;-.1063,-2.2629,1.0857;-.1116,-2.0288,2.4566;-.678,-4.3416,2.8533;-.8698,-5.584,1.1003;.0963,-1.4216,.4217;.115,-1.0207,2.8146;-.8779,-5.1667,3.5417;-.3886,-2.8863,4.4242;1.3077,-1.7319,-3.9222;1.4538,-1.3271,-3.0212;.3437,3.7075,-1.0742;-2.1398,-2.9746,-1.705;-2.9218,-3.1574,-.5603;-3.1092,-2.2878,.3777;-3.8381,-.7252,.6457;-4.7421,-.2702,-.9211;-2.5267,.4642,1.1984;-5.04,-1.0697,2.0383;-3.4045,-4.3695,-.3289;-4.116,-4.6146,.875;-4.0631,-.0021,-1.7459;-5.3815,.6111,-.7311;-5.3931,-1.0952,-1.2631;-1.6514,.5698,.5321;-2.1413,.1687,2.1898;-3.0009,1.4579,1.301;-5.498,-.1249,2.3827;-5.8572,-1.7438,1.7268;-4.5207,-1.5264,2.8994;-5.0521,-4.0331,.8981;-3.5009,-4.3634,1.753;-4.3466,-5.688,.8654;4.2794,-2.1974,-.1729;4.1338,-3.2906,-1.039;3.4881,-4.4502,-.6271;2.9943,-4.5119,.6706;3.1446,-3.4573,1.566;3.7799,-2.2995,1.1351;4.4897,-3.2149,-2.0697;3.3439,-5.2873,-1.3106;2.258,-5.7023,1.0974;2.7392,-3.5426,2.5753;3.8747,-1.4541,1.8183;-.4937,4.0222,.0047;-1.8632,3.8033,-.0645;-2.3925,3.267,-1.2332;-1.5944,2.976,-2.3367;-.2258,3.1952,-2.2489;-.0554,4.3973,.9326;-2.5174,4.019,.7807;-3.8259,2.9698,-1.2935;-2.0472,2.5689,-3.2415;.4139,2.9426,-3.0959;2.1667,-5.9191,2.2846;1.7627,-6.4009,.2319;-4.2994,2.6643,-2.3668;-4.4615,3.0285,-.2575;6.639,.1649,-2.002;5.9625,1.412,-1.8668;7.8256,.0943,-2.783;8.3089,1.2026,-3.4332;8.3413,-.8673,-2.8668;9.2192,1.136,-4.0355;6.4715,2.5335,-2.5799;7.6126,2.4317,-3.3389;5.9399,3.4858,-2.5269;7.9824,3.307,-3.8804;4.5778,3.907,-.2458;3.7569,5.0581,-.0622;5.9231,3.9622,.2158;6.4346,5.1091,.7739;6.5538,3.0757,.1294;7.4712,5.1255,1.1222;4.319,6.2348,.5055;5.6307,6.2663,.909;3.6798,7.1148,.6266;6.0515,7.1751,1.3481;-2.3622,-3.9165,-2.8716;-2.539,-4.9544,-2.5508;-3.2395,-3.5921,-3.4626;-1.4913,-3.9043,-3.5459;-1.7047,-1.5848,-2.0834;-2.4442,-1.1082,-2.7524;-1.5376,-.9266,-1.2165;-.7574,-1.625,-2.6447;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662923929955</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000773549943 0.000129270966 0.018280161233 0.005401105878</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057098164 -0.000054648 0.000032986 0.000242131 0.000282708 0.000326143 0.000395302 0.000515304 0.000648394 0.000821389 0.000944896 0.001014405 0.001172508 0.001276755 0.001411387 0.001447414 0.001644584 0.001812294 0.002015900 0.002328303 0.002519671 0.002748295 0.002894906 0.003468380 0.003580714 0.003795230 0.004327633 0.004623579 0.004929234 0.005109222 0.005123309 0.005323435 0.006123479 0.006434068 0.006591931 0.006932955 0.007211909 0.007632062 0.008180789 0.008705699 0.008878613 0.009552353 0.009884298 0.010093682 0.010989576 0.011203590 0.011899230 0.012566377 0.013372897 0.013792089 0.014106047 0.014626774 0.014996710 0.015466789 0.015883532 0.016617930 0.016994214 0.018593804 0.019002478 0.019449336 0.020342153 0.020540974 0.021570673 0.021887996 0.022492597 0.022784889 0.023497536 0.023826227 0.024519735 0.025896615 0.026642452 0.026904394 0.027232080 0.027556329 0.028305520 0.029079067 0.030924580 0.031535329 0.032163728 0.034102869 0.034666478 0.036031194 0.039048782 0.039528213 0.041982982 0.045406684 0.046136686 0.046858045 0.048871435 0.049695179 0.049910277 0.050830261 0.051537731 0.052188278 0.052288646 0.052412332 0.052927662 0.053603456 0.054926405 0.056102013 0.056425971 0.056725750 0.057016537 0.057279606 0.057761220 0.058593310 0.059244598 0.059725091 0.061366228 0.062091638 0.062913930 0.064238088 0.064566030 0.065059415 0.066007269 0.067506457 0.067952503 0.068984379 0.070528430 0.072134953 0.072640279 0.072929369 0.073317493 0.075156513 0.078736668 0.080867827 0.081704357 0.083352885 0.084562538 0.087896736 0.089005439 0.089409290 0.089850048 0.091319195 0.093331381 0.094579819 0.095493177 0.096223552 0.096858823 0.098501415 0.100150271 0.100695543 0.102724617 0.103848509 0.104287931 0.106557384 0.109113454 0.110953887 0.112284314 0.112840109 0.113827392 0.114770579 0.116967694 0.117197244 0.118629492 0.119285232 0.120589071 0.122307349 0.125172776 0.125839978 0.128539413 0.129014416 0.130998229 0.133709016 0.136434485 0.137735501 0.138620775 0.139635051 0.140553306 0.143519788 0.144694642 0.145932997 0.146802283 0.151992278 0.153635344 0.154274696 0.160821190 0.161320332 0.168559446 0.171464045 0.176026199 0.179103169 0.181616278 0.184467254 0.189106872 0.190011016 0.191858850 0.201309225 0.202228771 0.206293353 0.206966232 0.207266750 0.212361049 0.212578629 0.215605210 0.217036277 0.220436742 0.221008773 0.224614976 0.225049886 0.226711835 0.231866067 0.234575597 0.235710864 0.238559768 0.246438016 0.249199439 0.252043191 0.256558888 0.257224782 0.258285049 0.262573774 0.271578785 0.282918153 0.292023479 0.300022948 0.300169092 0.301059969 0.307134572 0.307786313 0.309851205 0.320064100 0.321362387 0.326457558 0.330458342 0.336629367 0.347755563 0.352022831 0.355651223 0.360880001 0.361917561 0.364143272 0.384562974 0.407168735 0.414465877 0.430271495 0.432199599 0.435297044 0.450916017 0.464684102 0.475643286 0.478836469 0.480419152 0.486674881 0.498900245 0.503941004 0.515212295 0.518037125 0.543800872 0.566932351 0.567706245 0.586605452 0.592204620 0.605821041 0.644268536 0.645476851 0.668031782 0.675681975 0.687374624 0.704002825 0.704360700 0.705849514 0.709795153 0.717242558 0.734101716 0.738023348 0.739778183 0.747635479 0.750807646 0.771615301 0.775986130 0.809004464 0.821843151 0.824084206 0.828937290 0.834295962 0.847585562 0.849473119 0.851402912 0.854587327 0.863366932 0.867473087 0.875900588 0.887499717 0.891148554 0.892478630 0.893583389 0.902108349 0.910282330 0.918092193 0.923829661 0.924631996 0.932011134 0.935746132 0.956101602 0.962982200 0.965231088 0.970116856 0.978273880 0.982600245 0.998648152 1.012990708 1.016193123 1.021896612 1.040202962 1.055111576 1.071208217 1.072687719 1.079483251 1.087382556 1.108493029 1.110427319 1.117872567 1.119061662 1.122624287 1.123918102 1.141888967 1.149078531 1.161761860 1.170183918 1.177266183 1.187716720 1.200762456 1.221974807 1.234069564 1.258182793 1.296484356 1.298308894 1.314740700 1.326482146 1.327541076 1.330247086 1.331404205 1.334794640 1.342416921 1.348985898 1.367474446 1.380006741 1.381332885 1.381834690 1.429574347 1.517308602 1.557999292 1.684793789 1.923029605</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">245</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92207217" y3="-0.954505" z3="-0.67822866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60881112" y3="-1.9504696" z3="-1.53797015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09123537" y3="-0.99591566" z3="-1.4019286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78072834" y3="1.47776992" z3="-1.06034182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29035868" y3="0.31118911" z3="-0.49896296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66139433" y3="2.73717419" z3="-1.16064598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00921543" y3="2.73567789" z3="-0.84750173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3792622" y3="4.99470761" z3="-0.38858666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81214839" y3="3.85181328" z3="-0.90120922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75175938" y3="5.87056819" z3="-0.19610785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0993266" y3="1.61064733" z3="-1.68730179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12714518" y3="0.35759296" z3="0.21391477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71683973" y3="0.38380575" z3="-0.64948246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60875266" y3="0.73480375" z3="0.27372295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66994464" y3="-0.85712324" z3="-1.5130269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09231506" y3="-2.46982471" z3="-1.32828984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99492537" y3="-5.48831082" z3="-6.28448365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73334607" y3="-5.05312566" z3="-5.31571866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04615767" y3="-3.91085812" z3="-2.85616313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70014115" y3="-3.67248982" z3="-5.16954053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45214234" y3="-5.87904653" z3="-4.22454954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12287946" y3="-5.30180374" z3="-3.00452419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36572534" y3="-3.06971871" z3="-3.94644466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92668059" y3="-3.00579819" z3="-6.00525502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50270625" y3="-6.96679806" z3="-4.31762397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94060503" y3="-5.93416972" z3="-2.13142303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64805276" y3="-3.36198125" z3="-1.61032775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35020859" y3="-3.84373245" z3="-0.86135974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6945108" y3="-4.84625849" z3="-1.12874351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38009124" y3="-3.5419384" z3="0.58747749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40389181" y3="-3.06770715" z3="3.34645046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68480127" y3="-4.57686216" z3="1.48022415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10678115" y3="-2.26513969" z3="1.08759909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11553807" y3="-2.03039682" z3="2.45827009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68809044" y3="-4.34198664" z3="2.85401931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87760682" y3="-5.5845986" z3="1.10074685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09963024" y3="-1.42465747" z3="0.42383043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11261849" y3="-1.02291588" z3="2.81668145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89172558" y3="-5.16655463" z3="3.54232956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39976714" y3="-2.88704959" z3="4.42536031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31760417" y3="-1.73383056" z3="-3.91680686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45944732" y3="-1.32889373" z3="-3.0153706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34285298" y3="3.70860233" z3="-1.06570707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13710621" y3="-2.97654554" z3="-1.70651549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92125275" y3="-3.15871447" z3="-0.56320589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11013713" y3="-2.28855527" z3="0.3740616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83897733" y3="-0.72546402" z3="0.64001385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73502524" y3="-0.26838193" z3="-0.93096271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52816402" y3="0.46133507" z3="1.19954895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04833956" y3="-1.06924407" z3="2.02608317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40508891" y3="-4.37060799" z3="-0.33272224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12034182" y3="-4.61497082" z3="0.86888611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05171589" y3="0.00733018" z3="-1.74960292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38110935" y3="0.60817928" z3="-0.74186871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37859476" y3="-1.09565771" z3="-1.28135336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6515123" y3="0.56828387" z3="0.53512437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14499924" y3="0.16263342" z3="2.19082804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00193973" y3="1.45504816" z3="1.30411073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50775495" y3="-0.12411612" z3="2.36791491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86427349" y3="-1.74271193" z3="1.70982888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.53445847" y3="-1.5264722" z3="2.8902707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0569414" y3="-4.03390639" z3="0.88857683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50831063" y3="-4.36313545" z3="1.7487281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35028571" y3="-5.68872039" z3="0.85936034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28080657" y3="-2.19642822" z3="-0.17279706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13518074" y3="-3.29127795" z3="-1.03691735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48952065" y3="-4.45020598" z3="-0.62299249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99514521" y3="-4.50941224" z3="0.67452744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14596943" y3="-3.45335057" z3="1.56834516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78179396" y3="-2.29652674" z3="1.1355828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49102154" y3="-3.21744791" z3="-2.067806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34560728" y3="-5.28867373" z3="-1.30507178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25761245" y3="-5.69860429" z3="1.103011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74051109" y3="-3.53691234" z3="2.57773324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87718528" y3="-1.45038278" z3="1.81760315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49234177" y3="4.02100068" z3="0.01553104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86215226" y3="3.80362822" z3="-0.05188687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39414867" y3="3.27133555" z3="-1.22121392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.5982859" y3="2.98243537" z3="-2.32686832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22923057" y3="3.19979614" z3="-2.24080906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.051936" y3="4.39324009" z3="0.94361307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51470195" y3="4.01761538" z3="0.79517245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82804567" y3="2.97623245" z3="-1.28014473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05301167" y3="2.57824604" z3="-3.23204628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40857858" y3="2.94925696" z3="-3.08990606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1651884" y3="-5.91317206" z3="2.29065147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76261613" y3="-6.39853219" z3="0.23845121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30387542" y3="2.67659023" z3="-2.35401021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46149574" y3="3.03043295" z3="-0.24263201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6351511" y3="0.16487818" z3="-2.01015737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95901373" y3="1.41197669" z3="-1.8736941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81936989" y3="0.09391926" z3="-2.79476511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30055571" y3="1.20186" z3="-3.4470343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33485084" y3="-0.86769656" z3="-2.87966959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2089934" y3="1.13503866" z3="-4.05211141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46590811" y3="2.53322658" z3="-2.58875341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60467349" y3="2.43099231" z3="-3.35121147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9345336" y3="3.48552522" z3="-2.53452747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97282012" y3="3.30605794" z3="-3.89421308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57909438" y3="3.90717559" z3="-0.24819856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.758629" y3="5.05805184" z3="-0.06103378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92590468" y3="3.96207645" z3="0.20919921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43912145" y3="5.10842474" z3="0.76688085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55656648" y3="3.07556113" z3="0.11954522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47682843" y3="5.12457099" z3="1.11187454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32245297" y3="6.23427851" z3="0.50615797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63540611" y3="6.2654511" z3="0.90571121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68354569" y3="7.1141249" z3="0.63010523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05754937" y3="7.17378276" z3="1.34453463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35780368" y3="-3.91857358" z3="-2.87344657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5361247" y3="-4.95636426" z3="-2.55278105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23360304" y3="-3.59351242" z3="-3.46643752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48550843" y3="-3.90720957" z3="-3.54602739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70063779" y3="-1.58688348" z3="-2.08461297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4388536" y3="-1.10965017" z3="-2.75450558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53418729" y3="-0.9288841" z3="-1.21745283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75258116" y3="-1.62791212" z3="-2.64464007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9221,-.9545,-.6782;6.6088,-1.9505,-1.538;6.0912,-.9959,-1.4019;4.7807,1.4778,-1.0603;4.2904,.3112,-.499;2.6614,2.7372,-1.1606;4.0092,2.7357,-.8475;2.3793,4.9947,-.3886;1.8121,3.8518,-.9012;1.7518,5.8706,-.1961;2.0993,1.6106,-1.6873;3.1271,.3576,.2139;1.7168,.3838,-.6495;.6088,.7348,.2737;1.6699,-.8571,-1.513;1.0923,-2.4698,-1.3283;1.9949,-5.4883,-6.2845;1.7333,-5.0531,-5.3157;1.0462,-3.9109,-2.8562;1.7001,-3.6725,-5.1695;1.4521,-5.879,-4.2245;1.1229,-5.3018,-3.0045;1.3657,-3.0697,-3.9464;1.9267,-3.0058,-6.0053;1.5027,-6.9668,-4.3176;.9406,-5.9342,-2.1314;.6481,-3.362,-1.6103;-.3502,-3.8437,-.8614;-.6945,-4.8463,-1.1287;-.3801,-3.5419,.5875;-.4039,-3.0677,3.3465;-.6848,-4.5769,1.4802;-.1068,-2.2651,1.0876;-.1155,-2.0304,2.4583;-.6881,-4.342,2.854;-.8776,-5.5846,1.1007;.0996,-1.4247,.4238;.1126,-1.0229,2.8167;-.8917,-5.1666,3.5423;-.3998,-2.887,4.4254;1.3176,-1.7338,-3.9168;1.4594,-1.3289,-3.0154;.3429,3.7086,-1.0657;-2.1371,-2.9765,-1.7065;-2.9213,-3.1587,-.5632;-3.1101,-2.2886,.3741;-3.839,-.7255,.64;-4.735,-.2684,-.931;-2.5282,.4613,1.1995;-5.0483,-1.0692,2.0261;-3.4051,-4.3706,-.3327;-4.1203,-4.615,.8689;-4.0517,.0073,-1.7496;-5.3811,.6082,-.7419;-5.3786,-1.0957,-1.2814;-1.6515,.5683,.5351;-2.145,.1626,2.1908;-3.0019,1.455,1.3041;-5.5078,-.1241,2.3679;-5.8643,-1.7427,1.7098;-4.5345,-1.5265,2.8903;-5.0569,-4.0339,.8886;-3.5083,-4.3631,1.7487;-4.3503,-5.6887,.8594;4.2808,-2.1964,-.1728;4.1352,-3.2913,-1.0369;3.4895,-4.4502,-.623;2.9951,-4.5094,.6745;3.146,-3.4534,1.5683;3.7818,-2.2965,1.1356;4.491,-3.2174,-2.0678;3.3456,-5.2887,-1.3051;2.2576,-5.6986,1.103;2.7405,-3.5369,2.5777;3.8772,-1.4504,1.8176;-.4923,4.021,.0155;-1.8622,3.8036,-.0519;-2.3941,3.2713,-1.2212;-1.5983,2.9824,-2.3269;-.2292,3.1998,-2.2408;-.0519,4.3932,.9436;-2.5147,4.0176,.7952;-3.828,2.9762,-1.2801;-2.053,2.5782,-3.232;.4086,2.9493,-3.0899;2.1652,-5.9132,2.2907;1.7626,-6.3985,.2385;-4.3039,2.6766,-2.354;-4.4615,3.0304,-.2426;6.6352,.1649,-2.0102;5.959,1.412,-1.8737;7.8194,.0939,-2.7948;8.3006,1.2019,-3.447;8.3349,-.8677,-2.8797;9.209,1.135,-4.0521;6.4659,2.5332,-2.5888;7.6047,2.431,-3.3512;5.9345,3.4855,-2.5345;7.9728,3.3061,-3.8942;4.5791,3.9072,-.2482;3.7586,5.0581,-.061;5.9259,3.9621,.2092;6.4391,5.1084,.7669;6.5566,3.0756,.1195;7.4768,5.1246,1.1119;4.3225,6.2343,.5062;5.6354,6.2655,.9057;3.6835,7.1141,.6301;6.0575,7.1738,1.3445;-2.3578,-3.9186,-2.8734;-2.5361,-4.9564,-2.5528;-3.2336,-3.5935,-3.4664;-1.4855,-3.9072,-3.546;-1.7006,-1.5869,-2.0846;-2.4389,-1.1097,-2.7545;-1.5342,-.9289,-1.2175;-.7526,-1.6279,-2.6446;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928358583</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000266842613 0.000043555232 0.019565538192 0.005384837178</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001686387323 0.001124258215</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097999 -0.000002098 0.000037183 0.000202271 0.000288038 0.000318184 0.000395451 0.000513574 0.000648307 0.000823768 0.000945653 0.001015143 0.001171329 0.001274345 0.001411807 0.001447341 0.001650122 0.001810749 0.002010610 0.002328998 0.002520128 0.002748319 0.002895212 0.003466499 0.003576258 0.003792071 0.004319171 0.004622985 0.004926258 0.005096526 0.005121755 0.005323063 0.006113221 0.006434569 0.006591002 0.006931079 0.007209079 0.007622463 0.008180757 0.008706193 0.008878760 0.009549754 0.009883884 0.010088978 0.010991344 0.011203172 0.011900086 0.012566593 0.013374677 0.013792609 0.014106154 0.014627243 0.014997660 0.015465397 0.015883869 0.016618251 0.016990269 0.018593027 0.018998854 0.019448694 0.020338653 0.020532984 0.021571265 0.021888476 0.022488403 0.022785315 0.023496901 0.023825778 0.024519410 0.025896618 0.026642424 0.026903902 0.027232595 0.027555820 0.028305700 0.029076955 0.030924835 0.031535633 0.032159494 0.034103107 0.034667061 0.036030583 0.039048953 0.039528546 0.041983179 0.045406694 0.046135819 0.046856034 0.048873427 0.049695325 0.049910359 0.050830723 0.051537782 0.052188251 0.052288651 0.052412301 0.052927988 0.053604677 0.054926496 0.056102562 0.056427381 0.056725834 0.057017081 0.057280599 0.057761195 0.058593719 0.059244650 0.059724945 0.061366297 0.062092180 0.062913813 0.064238409 0.064565988 0.065059387 0.066010921 0.067506645 0.067952333 0.068984274 0.070528327 0.072135760 0.072640379 0.072929471 0.073317305 0.075138924 0.078737354 0.080867840 0.081705714 0.083352838 0.084562736 0.087884250 0.089007040 0.089409378 0.089850069 0.091319032 0.093331446 0.094579879 0.095493208 0.096223717 0.096859162 0.098502214 0.100151612 0.100695955 0.102724642 0.103848054 0.104289673 0.106557603 0.109113547 0.110954509 0.112284454 0.112840052 0.113827969 0.114772622 0.116967501 0.117197592 0.118629057 0.119286471 0.120589426 0.122308266 0.125172355 0.125841096 0.128538695 0.129015151 0.131000407 0.133709045 0.136435695 0.137735503 0.138620867 0.139636097 0.140554222 0.143519815 0.144695004 0.145933006 0.146802475 0.151993250 0.153633347 0.154274687 0.160822100 0.161323080 0.168559775 0.171464169 0.176027517 0.179106172 0.181616724 0.184467606 0.189107811 0.190012219 0.191860355 0.201310197 0.202229429 0.206293462 0.206966235 0.207266742 0.212360945 0.212578763 0.215608943 0.217038944 0.220438276 0.221009111 0.224619779 0.225064687 0.226784501 0.231866213 0.234575800 0.235715560 0.238562073 0.246437265 0.249193976 0.252050176 0.256559052 0.257225010 0.258285286 0.262574753 0.271578864 0.282918427 0.292023668 0.300023934 0.300169092 0.301060069 0.307134746 0.307786537 0.309852321 0.320064331 0.321362396 0.326457654 0.330460479 0.336639177 0.347755609 0.352022842 0.355651332 0.360880033 0.361917765 0.364143313 0.384563050 0.407170403 0.414464946 0.430271896 0.432202548 0.435297749 0.450916596 0.464684128 0.475650458 0.478836522 0.480419200 0.486675670 0.498900257 0.503940357 0.515216656 0.518045399 0.543800887 0.566932451 0.567706700 0.586605532 0.592202827 0.605821239 0.644268656 0.645477799 0.668032008 0.675682643 0.687374661 0.704003763 0.704360825 0.705852057 0.709796258 0.717244113 0.734102191 0.738023861 0.739783041 0.747635362 0.750807584 0.771615305 0.775986360 0.809007093 0.821843304 0.824085665 0.828937924 0.834296420 0.847588963 0.849475316 0.851403231 0.854587568 0.863367235 0.867473105 0.875902860 0.887499811 0.891149613 0.892478716 0.893583774 0.902120500 0.910282575 0.918092777 0.923831975 0.924632090 0.932012062 0.935746753 0.956101700 0.962982336 0.965231558 0.970116626 0.978271183 0.982602306 0.998648273 1.012994809 1.016199589 1.021901376 1.040203550 1.055111756 1.071212091 1.072689177 1.079483584 1.087382789 1.108503355 1.110427554 1.117922436 1.119076700 1.122626179 1.123926865 1.141889019 1.149083639 1.161761942 1.170185540 1.177273618 1.187720013 1.200762489 1.221980995 1.234100825 1.258182921 1.296484619 1.298311249 1.314741133 1.326482140 1.327543805 1.330247059 1.331404309 1.334794722 1.342417242 1.348987563 1.367475974 1.380006864 1.381332892 1.381834628 1.429580773 1.517305949 1.557999430 1.684794036 1.923033059</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">246</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9197373" y3="-0.95454254" z3="-0.6813895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60430527" y3="-1.95123473" z3="-1.54459643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08723652" y3="-0.99652209" z3="-1.40778578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77856667" y3="1.47772875" z3="-1.06394841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28890601" y3="0.31149913" z3="-0.50121673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65973136" y3="2.73839841" z3="-1.1590345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00830277" y3="2.73604058" z3="-0.84913025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38059868" y3="4.99551655" z3="-0.38446592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81174111" y3="3.8533267" z3="-0.89667883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75387334" y3="5.87146898" z3="-0.18935782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0956509" y3="1.61236036" z3="-1.68465973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12730689" y3="0.35881373" z3="0.21420134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71508069" y3="0.38554495" z3="-0.64607637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60917812" y3="0.73662093" z3="0.27969117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66583843" y3="-0.8553923" z3="-1.50948288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09249718" y3="-2.47000065" z3="-1.32592987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01194691" y3="-5.4906438" z3="-6.27721716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74667994" y3="-5.05518813" z3="-5.30959243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05078953" y3="-3.91216975" z3="-2.85281326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71277584" y3="-3.67450547" z3="-5.16391916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46143402" y3="-5.88081215" z3="-4.21927572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12788579" y3="-5.30319671" z3="-3.00062085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37386578" y3="-3.07131126" z3="-3.94225721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94233976" y3="-3.0080174" z3="-5.99893627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51232887" y3="-6.9686156" z3="-4.31185214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94282736" y3="-5.9354066" z3="-2.12802185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64977568" y3="-3.36281436" z3="-1.60815786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34890186" y3="-3.84509473" z3="-0.86010748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69222203" y3="-4.84800894" z3="-1.12732943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38103107" y3="-3.54210848" z3="0.58839156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40921278" y3="-3.06496395" z3="3.34680278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68747889" y3="-4.57610326" z3="1.48170365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10798263" y3="-2.26499592" z3="1.08770895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11874859" y3="-2.02881101" z3="2.45810353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69301447" y3="-4.33974" z3="2.8552359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87986295" y3="-5.58433516" z3="1.10301129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09984305" y3="-1.42539267" z3="0.42330369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10915922" y3="-1.02092402" z3="2.81569522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89835739" y3="-5.1634029" z3="3.54400461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40686106" y3="-2.88316305" z3="4.42553084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32553195" y3="-1.73543328" z3="-3.91347908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46314166" y3="-1.32950905" z3="-3.01180928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34197065" y3="3.71096541" z3="-1.05787439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13569802" y3="-2.97940416" z3="-1.70819517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9211525" y3="-3.1607468" z3="-0.56561695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11163743" y3="-2.28971098" z3="0.37047105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83996103" y3="-0.72589149" z3="0.6338035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72739836" y3="-0.26527257" z3="-0.9410811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52985235" y3="0.45769205" z3="1.20142261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05782085" y3="-1.06913875" z3="2.01249872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40473328" y3="-4.37267134" z3="-0.33434864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12112209" y3="-4.61631388" z3="0.86688567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04025309" y3="0.01990499" z3="-1.75315943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3806619" y3="0.60574902" z3="-0.75115567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36313703" y3="-1.09452798" z3="-1.3009189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65083184" y3="0.56525584" z3="0.54007967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15062597" y3="0.15558488" z3="2.19316963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00260143" y3="1.45175411" z3="1.30718823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51743595" y3="-0.12346277" z3="2.35258474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87316819" y3="-1.74052666" z3="1.69042676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55025119" y3="-1.52843904" z3="2.87935044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05808425" y3="-4.03584425" z3="0.88503423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51001861" y3="-4.3630808" z3="1.7471033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35042068" y3="-5.69016876" z3="0.85827133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27947159" y3="-2.19613185" z3="-0.17387721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13479767" y3="-3.29265142" z3="-1.03605027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48987428" y3="-4.45129844" z3="-0.62020716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99490087" y3="-4.5084738" z3="0.67715647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14505688" y3="-3.45083677" z3="1.56921825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78047152" y3="-2.29447104" z3="1.13468953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49067313" y3="-3.22050604" z3="-2.06704784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3467477" y3="-5.29098877" z3="-1.30087357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2572037" y3="-5.69697877" z3="1.10725034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73935332" y3="-3.53278409" z3="2.57863634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87530296" y3="-1.44721125" z3="1.81539674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49038109" y3="4.0193872" z3="0.02645048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86046888" y3="3.80307351" z3="-0.03821365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39577562" y3="3.27650927" z3="-1.2087299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60280576" y3="2.99173046" z3="-2.31763062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23324403" y3="3.20738748" z3="-2.23364283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04728173" y3="4.38715957" z3="0.95520287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51085762" y3="4.01403157" z3="0.81115168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83020635" y3="2.98355669" z3="-1.2659154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06004473" y3="2.59191426" z3="-3.22344342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40211544" y3="2.96058805" z3="-3.085859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16409606" y3="-5.90951139" z3="2.29517458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76270649" y3="-6.39838232" z3="0.24359971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30897263" y3="2.69074573" z3="-2.34035468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46112276" y3="3.03250551" z3="-0.22658026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63015544" y3="0.16384634" z3="-2.01770256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95493531" y3="1.41128981" z3="-1.87995624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81249922" y3="0.09218233" z3="-2.80506183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2927057" y3="1.19979684" z3="-3.45861969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.327299" y3="-0.86970591" z3="-2.89101447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19969652" y3="1.13243196" z3="-4.06579561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46075826" y3="2.53223336" z3="-2.59626142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59771115" y3="2.42932503" z3="-3.36132198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93000509" y3="3.4848205" z3="-2.54081981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96509991" y3="3.3041447" z3="-3.90524876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58025176" y3="3.90681319" z3="-0.25037467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76083183" y3="5.05792237" z3="-0.06020692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92813194" y3="3.96060827" z3="0.20402311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4432356" y3="5.10614114" z3="0.7616263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55808945" y3="3.07385152" z3="0.11231391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48171802" y3="5.1213908" z3="1.1043416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32657609" y3="6.23329795" z3="0.50684272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64046252" y3="6.26342778" z3="0.90343344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68841973" y3="7.11330652" z3="0.63315807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06409248" y3="7.17108679" z3="1.34221059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35442678" y3="-3.92262034" z3="-2.87452147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53341031" y3="-4.96005639" z3="-2.55310031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22910346" y3="-3.59809116" z3="-3.46937942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48096968" y3="-3.91197902" z3="-3.5455998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69909558" y3="-1.58996837" z3="-2.08692765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43661157" y3="-1.11346667" z3="-2.7581107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53398837" y3="-0.93127095" z3="-1.21996316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75032389" y3="-1.63112047" z3="-2.6456857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9197,-.9545,-.6814;6.6043,-1.9512,-1.5446;6.0872,-.9965,-1.4078;4.7786,1.4777,-1.0639;4.2889,.3115,-.5012;2.6597,2.7384,-1.159;4.0083,2.736,-.8491;2.3806,4.9955,-.3845;1.8117,3.8533,-.8967;1.7539,5.8715,-.1894;2.0957,1.6124,-1.6847;3.1273,.3588,.2142;1.7151,.3855,-.6461;.6092,.7366,.2797;1.6658,-.8554,-1.5095;1.0925,-2.47,-1.3259;2.0119,-5.4906,-6.2772;1.7467,-5.0552,-5.3096;1.0508,-3.9122,-2.8528;1.7128,-3.6745,-5.1639;1.4614,-5.8808,-4.2193;1.1279,-5.3032,-3.0006;1.3739,-3.0713,-3.9423;1.9423,-3.008,-5.9989;1.5123,-6.9686,-4.3119;.9428,-5.9354,-2.128;.6498,-3.3628,-1.6082;-.3489,-3.8451,-.8601;-.6922,-4.848,-1.1273;-.381,-3.5421,.5884;-.4092,-3.065,3.3468;-.6875,-4.5761,1.4817;-.108,-2.265,1.0877;-.1187,-2.0288,2.4581;-.693,-4.3397,2.8552;-.8799,-5.5843,1.103;.0998,-1.4254,.4233;.1092,-1.0209,2.8157;-.8984,-5.1634,3.544;-.4069,-2.8832,4.4255;1.3255,-1.7354,-3.9135;1.4631,-1.3295,-3.0118;.342,3.711,-1.0579;-2.1357,-2.9794,-1.7082;-2.9212,-3.1607,-.5656;-3.1116,-2.2897,.3705;-3.84,-.7259,.6338;-4.7274,-.2653,-.9411;-2.5299,.4577,1.2014;-5.0578,-1.0691,2.0125;-3.4047,-4.3727,-.3343;-4.1211,-4.6163,.8669;-4.0403,.0199,-1.7532;-5.3807,.6057,-.7512;-5.3631,-1.0945,-1.3009;-1.6508,.5653,.5401;-2.1506,.1556,2.1932;-3.0026,1.4518,1.3072;-5.5174,-.1235,2.3526;-5.8732,-1.7405,1.6904;-4.5503,-1.5284,2.8794;-5.0581,-4.0358,.885;-3.51,-4.3631,1.7471;-4.3504,-5.6902,.8583;4.2795,-2.1961,-.1739;4.1348,-3.2927,-1.0361;3.4899,-4.4513,-.6202;2.9949,-4.5085,.6772;3.1451,-3.4508,1.5692;3.7805,-2.2945,1.1347;4.4907,-3.2205,-2.067;3.3467,-5.291,-1.3009;2.2572,-5.697,1.1073;2.7394,-3.5328,2.5786;3.8753,-1.4472,1.8154;-.4904,4.0194,.0265;-1.8605,3.8031,-.0382;-2.3958,3.2765,-1.2087;-1.6028,2.9917,-2.3176;-.2332,3.2074,-2.2336;-.0473,4.3872,.9552;-2.5109,4.014,.8112;-3.8302,2.9836,-1.2659;-2.06,2.5919,-3.2234;.4021,2.9606,-3.0859;2.1641,-5.9095,2.2952;1.7627,-6.3984,.2436;-4.309,2.6907,-2.3404;-4.4611,3.0325,-.2266;6.6302,.1638,-2.0177;5.9549,1.4113,-1.88;7.8125,.0922,-2.8051;8.2927,1.1998,-3.4586;8.3273,-.8697,-2.891;9.1997,1.1324,-4.0658;6.4608,2.5322,-2.5963;7.5977,2.4293,-3.3613;5.93,3.4848,-2.5408;7.9651,3.3041,-3.9052;4.5803,3.9068,-.2504;3.7608,5.0579,-.0602;5.9281,3.9606,.204;6.4432,5.1061,.7616;6.5581,3.0739,.1123;7.4817,5.1214,1.1043;4.3266,6.2333,.5068;5.6405,6.2634,.9034;3.6884,7.1133,.6332;6.0641,7.1711,1.3422;-2.3544,-3.9226,-2.8745;-2.5334,-4.9601,-2.5531;-3.2291,-3.5981,-3.4694;-1.481,-3.912,-3.5456;-1.6991,-1.59,-2.0869;-2.4366,-1.1135,-2.7581;-1.534,-.9313,-1.22;-.7503,-1.6311,-2.6457;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929910506</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000254461503 0.000047261000 0.024597836769 0.005359866718</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001768440390 0.001178960260</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097166 -0.000010308 0.000033987 0.000163715 0.000244074 0.000340126 0.000399708 0.000508402 0.000647836 0.000824288 0.000944171 0.001013052 0.001169983 0.001272014 0.001411864 0.001444431 0.001653221 0.001810296 0.001988225 0.002317851 0.002522044 0.002758408 0.002900964 0.003422460 0.003565758 0.003740594 0.004228500 0.004604575 0.004881463 0.005066459 0.005122081 0.005322406 0.006107580 0.006438063 0.006578867 0.006928357 0.007184401 0.007578788 0.008180530 0.008705795 0.008873502 0.009550775 0.009887289 0.010059461 0.010986773 0.011190570 0.011899393 0.012567264 0.013378219 0.013793090 0.014093816 0.014627064 0.014986391 0.015463058 0.015885195 0.016618561 0.016976811 0.018593055 0.018990121 0.019442774 0.020323843 0.020478371 0.021573510 0.021873747 0.022487834 0.022788041 0.023496656 0.023825371 0.024520217 0.025898507 0.026646039 0.026900390 0.027224635 0.027549251 0.028307170 0.029073251 0.030926534 0.031536626 0.032153918 0.034103844 0.034666257 0.036031441 0.039049224 0.039528414 0.041983769 0.045405254 0.046134700 0.046834768 0.048876734 0.049695788 0.049910323 0.050832188 0.051537775 0.052188541 0.052288679 0.052412232 0.052938015 0.053610937 0.054926192 0.056103495 0.056429633 0.056726467 0.057018051 0.057278849 0.057759755 0.058594259 0.059244966 0.059721461 0.061365763 0.062097448 0.062914369 0.064236539 0.064565658 0.065058912 0.066016392 0.067507971 0.067952892 0.068986931 0.070529294 0.072135804 0.072634212 0.072931676 0.073236863 0.075096684 0.078743980 0.080869049 0.081710205 0.083352502 0.084555463 0.087835651 0.088990628 0.089411822 0.089847703 0.091319354 0.093333197 0.094579039 0.095493400 0.096226927 0.096859178 0.098503135 0.100144138 0.100695018 0.102726873 0.103852365 0.104296754 0.106564983 0.109126036 0.110961096 0.112285999 0.112841527 0.113825981 0.114771095 0.116967826 0.117196917 0.118628562 0.119285430 0.120588055 0.122309752 0.125166292 0.125847171 0.128540475 0.129014262 0.131000604 0.133713976 0.136439972 0.137732582 0.138620292 0.139634394 0.140554560 0.143516059 0.144683672 0.145932797 0.146802649 0.151988941 0.153631378 0.154266222 0.160819926 0.161320202 0.168558073 0.171465079 0.176032733 0.179108471 0.181616905 0.184473533 0.189108185 0.190022429 0.191861385 0.201309711 0.202228562 0.206292627 0.206966482 0.207266635 0.212360566 0.212579196 0.215617727 0.217043371 0.220446787 0.221004862 0.224612984 0.225083838 0.226891465 0.231866967 0.234578035 0.235729167 0.238564092 0.246434506 0.249184869 0.252056606 0.256559660 0.257225266 0.258284701 0.262578060 0.271579362 0.282919159 0.292023855 0.300027750 0.300169797 0.301060385 0.307135250 0.307787102 0.309853282 0.320058472 0.321362274 0.326457725 0.330469837 0.336648433 0.347755353 0.352022918 0.355651482 0.360886654 0.361944453 0.364144141 0.384565864 0.407178701 0.414464443 0.430272584 0.432194889 0.435289249 0.450918183 0.464685805 0.475652243 0.478836182 0.480418767 0.486670494 0.498900412 0.503940359 0.515222147 0.518061504 0.543801265 0.566932651 0.567707725 0.586605643 0.592200130 0.605824584 0.644266567 0.645480607 0.668032941 0.675682946 0.687374685 0.703985882 0.704361069 0.705860829 0.709794087 0.717246453 0.734106719 0.738024533 0.739777385 0.747617862 0.750808231 0.771615455 0.775986551 0.809009076 0.821844197 0.824086249 0.828938174 0.834297768 0.847605193 0.849477435 0.851403967 0.854592720 0.863369771 0.867473193 0.875904670 0.887500192 0.891146239 0.892475279 0.893583537 0.902129581 0.910281864 0.918077650 0.923806373 0.924629477 0.932013793 0.935749155 0.956098385 0.962982730 0.965232895 0.970115481 0.978271291 0.982606088 0.998648431 1.013002935 1.016215119 1.021905615 1.040203994 1.055112495 1.071218277 1.072691955 1.079483748 1.087383298 1.108516477 1.110428105 1.117974826 1.119098124 1.122628411 1.123936516 1.141889640 1.149088338 1.161761997 1.170187130 1.177280434 1.187735238 1.200762559 1.221990025 1.234120310 1.258183274 1.296484801 1.298312964 1.314740602 1.326481272 1.327534497 1.330244845 1.331405115 1.334794993 1.342423254 1.348996889 1.367545453 1.380007188 1.381333544 1.381835204 1.429588384 1.517286236 1.557999757 1.684794624 1.923013898</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">247</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91961542" y3="-0.95483632" z3="-0.68021341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60374441" y3="-1.9507538" z3="-1.54518227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08609768" y3="-0.99638103" z3="-1.40828985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77635007" y3="1.47710071" z3="-1.06383097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28826675" y3="0.31090019" z3="-0.49972773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65704885" y3="2.73748587" z3="-1.154619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00628108" y3="2.73528441" z3="-0.84763014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.379618" y3="4.99503913" z3="-0.38058882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80974984" y3="3.85263199" z3="-0.89110461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75342591" y3="5.87102519" z3="-0.18582264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09202724" y3="1.61144605" z3="-1.67918559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12781825" y3="0.35797073" z3="0.21755866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.714197" y3="0.38406078" z3="-0.64032287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60959959" y3="0.73423388" z3="0.2873239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66419753" y3="-0.85663144" z3="-1.50396006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09407595" y3="-2.4723163" z3="-1.32234697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01049119" y3="-5.48959116" z3="-6.27727804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7467681" y3="-5.0548273" z3="-5.30888757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05356398" y3="-3.9134781" z3="-2.85050931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71457487" y3="-3.67438206" z3="-5.16189195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46175077" y3="-5.88114729" z3="-4.21894511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12957339" y3="-5.30435965" z3="-2.99951652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37729305" y3="-3.07200208" z3="-3.93931441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94406142" y3="-3.00738929" z3="-5.9965862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51153207" y3="-6.96882028" z3="-4.31253301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94434204" y3="-5.93714893" z3="-2.12734492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65201654" y3="-3.36495025" z3="-1.60564565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34713137" y3="-3.8479677" z3="-0.85864444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68977061" y3="-4.85087171" z3="-1.12654863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38063351" y3="-3.545922" z3="0.58992754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40748078" y3="-3.07187962" z3="3.34880692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68471663" y3="-4.58126902" z3="1.4823066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11021765" y3="-2.26841422" z3="1.09017973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12066099" y3="-2.03357733" z3="2.46077459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68975257" y3="-4.34624044" z3="2.85602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87584514" y3="-5.58890558" z3="1.10243739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09577678" y3="-1.42779972" z3="0.42645191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10578796" y3="-1.02591722" z3="2.81937181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89214342" y3="-5.1713539" z3="3.54452026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40466007" y3="-2.89124515" z3="4.42766101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33097237" y3="-1.73624841" z3="-3.90930634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46623663" y3="-1.33112259" z3="-3.00697151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33967109" y3="3.71162375" z3="-1.05053655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13371396" y3="-2.98376798" z3="-1.70978089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92002291" y3="-3.16146942" z3="-0.56733954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11201222" y3="-2.28680628" z3="0.36520077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83922489" y3="-0.7216027" z3="0.6242823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71563644" y3="-0.25554441" z3="-0.95544319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52892671" y3="0.45695533" z3="1.20160775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06737164" y3="-1.06301187" z3="1.99431496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40337277" y3="-4.37283656" z3="-0.33224403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11960602" y3="-4.61246289" z3="0.86959357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02297046" y3="0.03482966" z3="-1.76107429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37178605" y3="0.61336232" z3="-0.76554022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34745469" y3="-1.08395597" z3="-1.32418605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64668826" y3="0.56376221" z3="0.54434399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15495421" y3="0.15095098" z3="2.19427945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99964935" y3="1.4517957" z3="1.30822743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52684721" y3="-0.11641767" z3="2.33222134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88239109" y3="-1.73184813" z3="1.66582892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56689639" y3="-1.52456327" z3="2.86419573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05569377" y3="-4.03046164" z3="0.88703026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50778178" y3="-4.35850356" z3="1.74890228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35028686" y3="-5.6863037" z3="0.86365579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28064706" y3="-2.19668902" z3="-0.17165494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13678333" y3="-3.29381139" z3="-1.03324277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49269641" y3="-4.45268361" z3="-0.61683623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99765511" y3="-4.50948399" z3="0.68051621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14715143" y3="-3.45135209" z3="1.57209562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7818586" y3="-2.29481719" z3="1.13703252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49255007" y3="-3.22197911" z3="-2.06430873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35029679" y3="-5.29291175" z3="-1.29703368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26071927" y3="-5.69833277" z3="1.11100238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74168204" y3="-3.53315509" z3="2.58162645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87626779" y3="-1.4473085" z3="1.81739531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4909394" y3="4.02006168" z3="0.03541792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86168739" y3="3.80725561" z3="-0.02882207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39917583" y3="3.28364376" z3="-1.19952447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60780833" y3="2.99832166" z3="-2.30933085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23773191" y3="3.21069398" z3="-2.22649091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04634045" y3="4.38635334" z3="0.96377581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51078808" y3="4.01842744" z3="0.82172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83443041" y3="2.99489861" z3="-1.25615584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06686001" y3="2.60127036" z3="-3.21554559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39622267" y3="2.96369931" z3="-3.07943649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16828816" y3="-5.91099579" z3="2.29907875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76611625" y3="-6.39982945" z3="0.2474646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31554812" y3="2.70961808" z3="-2.33162117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46364726" y3="3.03952806" z3="-0.21559326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62698855" y3="0.1638682" z3="-2.02020313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95100964" y3="1.41081752" z3="-1.88230139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80771985" y3="0.09246184" z3="-2.80998809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28535113" y3="1.19971781" z3="-3.46600316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32326298" y3="-0.86897104" z3="-2.89593614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19098586" y3="1.13251405" z3="-4.07519788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45416917" y3="2.53137876" z3="-2.60102307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58937186" y3="2.42861603" z3="-3.36868176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92258126" y3="3.48345633" z3="-2.54555538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95455551" y3="3.30303663" z3="-3.91469229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5794784" y3="3.9063722" z3="-0.25071678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76044905" y3="5.05766224" z3="-0.05934962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92854855" y3="3.96052395" z3="0.20015977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44500816" y3="5.10659527" z3="0.75543602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55850428" y3="3.07362147" z3="0.1071808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48445639" y3="5.12215476" z3="1.09528293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3275439" y3="6.23358085" z3="0.50520654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64247966" y3="6.2640724" z3="0.89828138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68962704" y3="7.11379146" z3="0.63234789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06719327" y3="7.17221918" z3="1.33500796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35168474" y3="-3.9306943" z3="-2.87336119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53187935" y3="-4.96684851" z3="-2.54852226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22540498" y3="-3.60757629" z3="-3.47049625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47741828" y3="-3.92315149" z3="-3.54346836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69686515" y3="-1.59530076" z3="-2.0923996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43425549" y3="-1.12022485" z3="-2.76460216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53134645" y3="-0.93448027" z3="-1.2270727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74796998" y3="-1.63812206" z3="-2.65103148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9196,-.9548,-.6802;6.6037,-1.9508,-1.5452;6.0861,-.9964,-1.4083;4.7764,1.4771,-1.0638;4.2883,.3109,-.4997;2.657,2.7375,-1.1546;4.0063,2.7353,-.8476;2.3796,4.995,-.3806;1.8097,3.8526,-.8911;1.7534,5.871,-.1858;2.092,1.6114,-1.6792;3.1278,.358,.2176;1.7142,.3841,-.6403;.6096,.7342,.2873;1.6642,-.8566,-1.504;1.0941,-2.4723,-1.3223;2.0105,-5.4896,-6.2773;1.7468,-5.0548,-5.3089;1.0536,-3.9135,-2.8505;1.7146,-3.6744,-5.1619;1.4618,-5.8811,-4.2189;1.1296,-5.3044,-2.9995;1.3773,-3.072,-3.9393;1.9441,-3.0074,-5.9966;1.5115,-6.9688,-4.3125;.9443,-5.9371,-2.1273;.652,-3.365,-1.6056;-.3471,-3.848,-.8586;-.6898,-4.8509,-1.1265;-.3806,-3.5459,.5899;-.4075,-3.0719,3.3488;-.6847,-4.5813,1.4823;-.1102,-2.2684,1.0902;-.1207,-2.0336,2.4608;-.6898,-4.3462,2.856;-.8758,-5.5889,1.1024;.0958,-1.4278,.4265;.1058,-1.0259,2.8194;-.8921,-5.1714,3.5445;-.4047,-2.8912,4.4277;1.331,-1.7362,-3.9093;1.4662,-1.3311,-3.007;.3397,3.7116,-1.0505;-2.1337,-2.9838,-1.7098;-2.92,-3.1615,-.5673;-3.112,-2.2868,.3652;-3.8392,-.7216,.6243;-4.7156,-.2555,-.9554;-2.5289,.457,1.2016;-5.0674,-1.063,1.9943;-3.4034,-4.3728,-.3322;-4.1196,-4.6125,.8696;-4.023,.0348,-1.7611;-5.3718,.6134,-.7655;-5.3475,-1.084,-1.3242;-1.6467,.5638,.5443;-2.155,.151,2.1943;-2.9996,1.4518,1.3082;-5.5268,-.1164,2.3322;-5.8824,-1.7318,1.6658;-4.5669,-1.5246,2.8642;-5.0557,-4.0305,.887;-3.5078,-4.3585,1.7489;-4.3503,-5.6863,.8637;4.2806,-2.1967,-.1717;4.1368,-3.2938,-1.0332;3.4927,-4.4527,-.6168;2.9977,-4.5095,.6805;3.1472,-3.4514,1.5721;3.7819,-2.2948,1.137;4.4926,-3.222,-2.0643;3.3503,-5.2929,-1.297;2.2607,-5.6983,1.111;2.7417,-3.5332,2.5816;3.8763,-1.4473,1.8174;-.4909,4.0201,.0354;-1.8617,3.8073,-.0288;-2.3992,3.2836,-1.1995;-1.6078,2.9983,-2.3093;-.2377,3.2107,-2.2265;-.0463,4.3864,.9638;-2.5108,4.0184,.8217;-3.8344,2.9949,-1.2562;-2.0669,2.6013,-3.2155;.3962,2.9637,-3.0794;2.1683,-5.911,2.2991;1.7661,-6.3998,.2475;-4.3155,2.7096,-2.3316;-4.4636,3.0395,-.2156;6.627,.1639,-2.0202;5.951,1.4108,-1.8823;7.8077,.0925,-2.81;8.2854,1.1997,-3.466;8.3233,-.869,-2.8959;9.191,1.1325,-4.0752;6.4542,2.5314,-2.601;7.5894,2.4286,-3.3687;5.9226,3.4835,-2.5456;7.9546,3.303,-3.9147;4.5795,3.9064,-.2507;3.7604,5.0577,-.0593;5.9285,3.9605,.2002;6.445,5.1066,.7554;6.5585,3.0736,.1072;7.4845,5.1222,1.0953;4.3275,6.2336,.5052;5.6425,6.2641,.8983;3.6896,7.1138,.6323;6.0672,7.1722,1.335;-2.3517,-3.9307,-2.8734;-2.5319,-4.9668,-2.5485;-3.2254,-3.6076,-3.4705;-1.4774,-3.9232,-3.5435;-1.6969,-1.5953,-2.0924;-2.4343,-1.1202,-2.7646;-1.5313,-.9345,-1.2271;-.748,-1.6381,-2.651;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929051263</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000786790937 0.000112145738 0.026538498608 0.005379543471</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097390 -0.000005389 0.000037430 0.000182056 0.000300722 0.000329327 0.000406900 0.000507499 0.000647834 0.000824781 0.000945605 0.001012525 0.001170833 0.001274601 0.001411877 0.001444067 0.001656854 0.001811134 0.001997623 0.002323717 0.002521801 0.002768548 0.002911491 0.003412113 0.003565431 0.003734279 0.004220777 0.004603167 0.004877968 0.005064589 0.005122916 0.005322784 0.006105375 0.006437335 0.006575807 0.006928750 0.007183337 0.007576664 0.008180738 0.008706316 0.008873041 0.009551501 0.009886321 0.010054310 0.010986872 0.011190333 0.011900705 0.012568423 0.013378434 0.013796394 0.014097665 0.014626750 0.014986932 0.015462816 0.015887660 0.016619587 0.016979781 0.018593728 0.018988499 0.019441613 0.020319143 0.020470154 0.021575459 0.021874907 0.022489166 0.022788453 0.023496701 0.023825955 0.024520120 0.025898883 0.026648387 0.026902189 0.027226258 0.027548233 0.028313321 0.029073193 0.030928480 0.031538010 0.032150689 0.034106189 0.034666445 0.036032284 0.039049200 0.039527812 0.041983879 0.045405156 0.046134829 0.046833688 0.048877576 0.049695950 0.049911023 0.050832556 0.051537768 0.052188729 0.052288689 0.052412355 0.052947910 0.053612357 0.054926224 0.056105736 0.056430432 0.056727065 0.057018528 0.057277379 0.057759525 0.058594716 0.059245548 0.059721041 0.061366262 0.062101720 0.062916022 0.064236978 0.064566590 0.065059215 0.066017032 0.067509083 0.067953885 0.068988211 0.070530221 0.072137198 0.072635057 0.072932440 0.073229589 0.075092918 0.078747621 0.080869651 0.081714166 0.083352483 0.084554719 0.087830032 0.088989921 0.089412514 0.089848421 0.091320122 0.093333774 0.094579012 0.095493950 0.096231946 0.096859291 0.098505427 0.100143626 0.100695019 0.102728954 0.103857123 0.104302957 0.106575120 0.109136751 0.110967190 0.112286338 0.112843221 0.113825750 0.114773512 0.116968453 0.117198184 0.118629076 0.119284766 0.120588032 0.122312467 0.125166335 0.125848753 0.128541119 0.129014405 0.131002405 0.133716746 0.136450342 0.137732564 0.138621483 0.139635567 0.140555045 0.143516809 0.144683462 0.145933552 0.146802620 0.151988933 0.153630552 0.154266065 0.160819989 0.161320454 0.168558760 0.171465224 0.176036106 0.179109292 0.181616741 0.184475368 0.189111578 0.190032930 0.191861991 0.201311105 0.202228760 0.206292758 0.206966639 0.207266678 0.212364433 0.212579347 0.215618847 0.217044204 0.220448345 0.221005937 0.224624177 0.225087655 0.226910601 0.231867643 0.234579749 0.235757597 0.238564542 0.246435907 0.249184993 0.252082744 0.256559931 0.257225770 0.258285166 0.262578344 0.271579450 0.282920387 0.292023962 0.300032961 0.300170648 0.301060753 0.307136238 0.307787264 0.309853272 0.320063778 0.321362281 0.326458120 0.330495900 0.336651852 0.347755635 0.352022932 0.355651606 0.360891535 0.361972746 0.364144624 0.384568722 0.407185513 0.414467172 0.430273233 0.432194625 0.435291782 0.450923107 0.464687185 0.475652133 0.478836154 0.480421206 0.486670379 0.498900696 0.503943779 0.515223414 0.518062425 0.543803153 0.566934332 0.567710506 0.586607160 0.592199548 0.605828267 0.644267092 0.645491798 0.668034297 0.675683964 0.687374726 0.703991317 0.704361239 0.705860285 0.709814634 0.717246561 0.734112193 0.738024940 0.739777484 0.747619015 0.750808804 0.771615637 0.775986854 0.809009450 0.821844486 0.824086527 0.828939420 0.834298078 0.847643066 0.849484434 0.851404379 0.854594836 0.863373259 0.867473314 0.875907658 0.887500690 0.891146158 0.892479665 0.893584481 0.902132213 0.910282176 0.918077334 0.923808171 0.924629811 0.932016194 0.935773897 0.956107251 0.962983497 0.965234334 0.970115946 0.978272168 0.982606098 0.998648849 1.013003686 1.016216895 1.021910350 1.040206920 1.055113543 1.071220911 1.072704098 1.079484092 1.087383418 1.108521635 1.110428532 1.117997796 1.119103908 1.122629343 1.123942577 1.141890418 1.149093563 1.161762123 1.170189422 1.177289804 1.187782553 1.200762585 1.222020074 1.234123156 1.258188852 1.296485848 1.298313516 1.314741692 1.326481398 1.327535058 1.330246125 1.331405667 1.334794991 1.342427467 1.349012977 1.367677992 1.380007438 1.381334046 1.381836135 1.429587870 1.517300356 1.557999895 1.684801180 1.923027714</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">248</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91813986" y3="-0.95481179" z3="-0.68061857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59932899" y3="-1.95211453" z3="-1.54980009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08260949" y3="-0.99737008" z3="-1.41192279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77515278" y3="1.47702903" z3="-1.0657117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28814352" y3="0.31154324" z3="-0.49916278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65592326" y3="2.73778047" z3="-1.1531367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00586431" y3="2.73563791" z3="-0.84920361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38097516" y3="4.9966342" z3="-0.38200285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80965244" y3="3.85366163" z3="-0.88973162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75538588" y3="5.87329348" z3="-0.1863329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08900058" y3="1.61120069" z3="-1.67435766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12968439" y3="0.36014599" z3="0.22130684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7139236" y3="0.38495115" z3="-0.63317502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61117327" y3="0.73513496" z3="0.29658315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66257878" y3="-0.85646834" z3="-1.49573558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09418235" y3="-2.47207492" z3="-1.31805252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03702969" y3="-5.48581577" z3="-6.2688174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76689604" y3="-5.05183994" z3="-5.30190574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05900708" y3="-3.91248797" z3="-2.84681968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73314774" y3="-3.67146186" z3="-5.15401014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47525487" y3="-5.8790557" z3="-4.21457436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1358215" y3="-5.30327382" z3="-2.99673224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3881971" y3="-3.07005478" z3="-3.93316774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96763911" y3="-3.00371425" z3="-5.98657441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52589652" y3="-6.9666939" z3="-4.3087257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94620221" y3="-5.93686127" z3="-2.12618543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65331392" y3="-3.36502942" z3="-1.60291989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34769879" y3="-3.84849034" z3="-0.85876946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69037583" y3="-4.85080049" z3="-1.12893552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38408617" y3="-3.54864828" z3="0.59025075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4203835" y3="-3.07850929" z3="3.34958282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69362824" y3="-4.5848421" z3="1.47985786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11194098" y3="-2.27283581" z3="1.09366192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12669161" y3="-2.04029563" z3="2.46466605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70297631" y3="-4.35212475" z3="2.85394987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88520419" y3="-5.59208611" z3="1.09795094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09870811" y3="-1.43180868" z3="0.43198176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10045982" y3="-1.03346795" z3="2.82572706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91070394" y3="-5.17743898" z3="3.53975056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42101781" y3="-2.89951976" z3="4.42876507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3409055" y3="-1.73425772" z3="-3.90263467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4723845" y3="-1.32944795" z3="-2.99956599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33929831" y3="3.71243367" z3="-1.04671115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13181716" y3="-2.98095511" z3="-1.7110515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92065989" y3="-3.16033372" z3="-0.57050866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1125889" y3="-2.28813785" z3="0.36419515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83917815" y3="-0.72280322" z3="0.6253069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7133277" y3="-0.25500517" z3="-0.95475879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52938731" y3="0.4543926" z3="1.20577228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06923237" y3="-1.06520828" z3="1.99328672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40674853" y3="-4.37128165" z3="-0.33970641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12624488" y3="-4.61322149" z3="0.86008036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01978402" y3="0.0402534" z3="-1.75746365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37340088" y3="0.61058891" z3="-0.76447379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34052745" y3="-1.08466936" z3="-1.32765724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64693445" y3="0.5628438" z3="0.54909023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1556716" y3="0.14594092" z3="2.19767895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99995735" y3="1.44913815" z3="1.31458427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52878618" y3="-0.11859527" z3="2.33078049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88387308" y3="-1.73360744" z3="1.6635589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57029876" y3="-1.52731212" z3="2.86354358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06231326" y3="-4.03105756" z3="0.87588311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51647209" y3="-4.36087049" z3="1.74150601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3575478" y3="-5.68679472" z3="0.85153808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27962359" y3="-2.19629269" z3="-0.17064269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13683534" y3="-3.2945284" z3="-1.03105185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49265651" y3="-4.45316091" z3="-0.61396884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99596384" y3="-4.50850912" z3="0.68277002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14468071" y3="-3.44937303" z3="1.57337147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77985305" y3="-2.2932317" z3="1.13778329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49342683" y3="-3.22394525" z3="-2.06190109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35126646" y3="-5.2943106" z3="-1.29337334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25781162" y3="-5.69656496" z3="1.1134678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73803859" y3="-3.53000853" z3="2.58250276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87356829" y3="-1.44506985" z3="1.81747052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48987079" y3="4.02002491" z3="0.04043924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86053431" y3="3.80646281" z3="-0.02167167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39948389" y3="3.28377823" z3="-1.19217975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60953649" y3="2.99930147" z3="-2.30325819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23939707" y3="3.21169603" z3="-2.22193474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04392305" y3="4.38562339" z3="0.96863666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50864361" y3="4.0169851" z3="0.82957593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83485207" y3="2.99525996" z3="-1.24741413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06972244" y3="2.60277293" z3="-3.20904668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39368902" y3="2.96506531" z3="-3.07578034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16319726" y3="-5.90766026" z3="2.3015129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76440356" y3="-6.39894197" z3="0.25000787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31753527" y3="2.71249268" z3="-2.32274297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46256876" y3="3.03747548" z3="-0.20587335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62247402" y3="0.16213831" z3="-2.02610957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94757988" y3="1.40960139" z3="-1.88727353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80090728" y3="0.08941775" z3="-2.81921358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27741325" y3="1.1959756" z3="-3.47726454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31552053" y3="-0.87247777" z3="-2.90606578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1812758" y3="1.12777613" z3="-4.08897436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44944649" y3="2.5294046" z3="-2.60813316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58251643" y3="2.42544528" z3="-3.37876059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91862531" y3="3.48187516" z3="-2.55186122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94680813" y3="3.29935561" z3="-3.92623299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58081019" y3="3.90745234" z3="-0.25530968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76261601" y3="5.05920312" z3="-0.06377085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.930852" y3="3.96188055" z3="0.19256924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44893644" y3="5.1085661" z3="0.74511874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56015732" y3="3.07474001" z3="0.09981466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48908531" y3="5.12434381" z3="1.08270508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3313618" y3="6.23569637" z3="0.49802144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64715791" y3="6.26639981" z3="0.88817301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69407774" y3="7.11617543" z3="0.62528554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07315611" y3="7.17498527" z3="1.32281459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34862006" y3="-3.92481034" z3="-2.87728093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53078887" y3="-4.96149907" z3="-2.55533698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22057509" y3="-3.59913469" z3="-3.47536426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47296476" y3="-3.91666731" z3="-3.54556267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6926592" y3="-1.59226753" z3="-2.08939491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42904011" y3="-1.11456784" z3="-2.76094594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5271261" y3="-0.93407981" z3="-1.22207085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74370895" y3="-1.63465136" z3="-2.64753974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9181,-.9548,-.6806;6.5993,-1.9521,-1.5498;6.0826,-.9974,-1.4119;4.7752,1.477,-1.0657;4.2881,.3115,-.4992;2.6559,2.7378,-1.1531;4.0059,2.7356,-.8492;2.381,4.9966,-.382;1.8097,3.8537,-.8897;1.7554,5.8733,-.1863;2.089,1.6112,-1.6744;3.1297,.3601,.2213;1.7139,.385,-.6332;.6112,.7351,.2966;1.6626,-.8565,-1.4957;1.0942,-2.4721,-1.3181;2.037,-5.4858,-6.2688;1.7669,-5.0518,-5.3019;1.059,-3.9125,-2.8468;1.7331,-3.6715,-5.154;1.4753,-5.8791,-4.2146;1.1358,-5.3033,-2.9967;1.3882,-3.0701,-3.9332;1.9676,-3.0037,-5.9866;1.5259,-6.9667,-4.3087;.9462,-5.9369,-2.1262;.6533,-3.365,-1.6029;-.3477,-3.8485,-.8588;-.6904,-4.8508,-1.1289;-.3841,-3.5486,.5903;-.4204,-3.0785,3.3496;-.6936,-4.5848,1.4799;-.1119,-2.2728,1.0937;-.1267,-2.0403,2.4647;-.703,-4.3521,2.8539;-.8852,-5.5921,1.098;.0987,-1.4318,.432;.1005,-1.0335,2.8257;-.9107,-5.1774,3.5398;-.421,-2.8995,4.4288;1.3409,-1.7343,-3.9026;1.4724,-1.3294,-2.9996;.3393,3.7124,-1.0467;-2.1318,-2.981,-1.7111;-2.9207,-3.1603,-.5705;-3.1126,-2.2881,.3642;-3.8392,-.7228,.6253;-4.7133,-.255,-.9548;-2.5294,.4544,1.2058;-5.0692,-1.0652,1.9933;-3.4067,-4.3713,-.3397;-4.1262,-4.6132,.8601;-4.0198,.0403,-1.7575;-5.3734,.6106,-.7645;-5.3405,-1.0847,-1.3277;-1.6469,.5628,.5491;-2.1557,.1459,2.1977;-3,1.4491,1.3146;-5.5288,-.1186,2.3308;-5.8839,-1.7336,1.6636;-4.5703,-1.5273,2.8635;-5.0623,-4.0311,.8759;-3.5165,-4.3609,1.7415;-4.3575,-5.6868,.8515;4.2796,-2.1963,-.1706;4.1368,-3.2945,-1.0311;3.4927,-4.4532,-.614;2.996,-4.5085,.6828;3.1447,-3.4494,1.5734;3.7799,-2.2932,1.1378;4.4934,-3.2239,-2.0619;3.3513,-5.2943,-1.2934;2.2578,-5.6966,1.1135;2.738,-3.53,2.5825;3.8736,-1.4451,1.8175;-.4899,4.02,.0404;-1.8605,3.8065,-.0217;-2.3995,3.2838,-1.1922;-1.6095,2.9993,-2.3033;-.2394,3.2117,-2.2219;-.0439,4.3856,.9686;-2.5086,4.017,.8296;-3.8349,2.9953,-1.2474;-2.0697,2.6028,-3.209;.3937,2.9651,-3.0758;2.1632,-5.9077,2.3015;1.7644,-6.3989,.25;-4.3175,2.7125,-2.3227;-4.4626,3.0375,-.2059;6.6225,.1621,-2.0261;5.9476,1.4096,-1.8873;7.8009,.0894,-2.8192;8.2774,1.196,-3.4773;8.3155,-.8725,-2.9061;9.1813,1.1278,-4.089;6.4494,2.5294,-2.6081;7.5825,2.4254,-3.3788;5.9186,3.4819,-2.5519;7.9468,3.2994,-3.9262;4.5808,3.9075,-.2553;3.7626,5.0592,-.0638;5.9309,3.9619,.1926;6.4489,5.1086,.7451;6.5602,3.0747,.0998;7.4891,5.1243,1.0827;4.3314,6.2357,.498;5.6472,6.2664,.8882;3.6941,7.1162,.6253;6.0732,7.175,1.3228;-2.3486,-3.9248,-2.8773;-2.5308,-4.9615,-2.5553;-3.2206,-3.5991,-3.4754;-1.473,-3.9167,-3.5456;-1.6927,-1.5923,-2.0894;-2.429,-1.1146,-2.7609;-1.5271,-.9341,-1.2221;-.7437,-1.6347,-2.6475;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929982647</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000682580670 0.000076473598 0.015752481417 0.004259635004</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097075 -0.000069900 0.000032500 0.000174444 0.000302275 0.000359585 0.000407265 0.000504487 0.000647537 0.000826130 0.000956083 0.001014124 0.001169495 0.001275340 0.001410916 0.001441550 0.001654629 0.001808640 0.001998520 0.002320068 0.002519348 0.002768492 0.002912447 0.003333957 0.003565486 0.003688485 0.004126162 0.004596203 0.004846593 0.005050662 0.005125105 0.005324088 0.006095904 0.006435098 0.006555157 0.006928120 0.007154025 0.007530013 0.008179460 0.008709173 0.008868053 0.009547920 0.009880659 0.009984830 0.010981725 0.011190516 0.011896813 0.012570211 0.013379747 0.013794358 0.014061583 0.014623701 0.014968373 0.015461434 0.015888027 0.016617122 0.016891647 0.018593828 0.018978146 0.019435112 0.020298704 0.020450180 0.021574278 0.021862587 0.022490016 0.022787435 0.023496877 0.023825190 0.024519866 0.025898024 0.026639660 0.026899318 0.027210674 0.027542817 0.028313377 0.029073764 0.030928282 0.031538514 0.032137763 0.034105114 0.034665937 0.036032578 0.039049428 0.039528365 0.041984492 0.045405331 0.046132740 0.046808199 0.048880169 0.049696012 0.049911781 0.050832527 0.051537785 0.052188902 0.052288651 0.052412430 0.052955829 0.053613228 0.054924627 0.056106316 0.056430735 0.056727221 0.057017759 0.057270855 0.057757306 0.058595312 0.059245631 0.059720089 0.061366261 0.062105635 0.062914883 0.064234376 0.064566617 0.065059778 0.066015009 0.067509800 0.067948517 0.068988984 0.070529728 0.072135125 0.072618698 0.072932024 0.073084452 0.074929682 0.078745590 0.080871769 0.081714214 0.083352036 0.084549596 0.087827695 0.088982101 0.089412228 0.089849207 0.091319662 0.093334868 0.094578313 0.095494362 0.096233069 0.096858984 0.098504849 0.100140948 0.100695728 0.102735386 0.103866714 0.104312405 0.106579483 0.109143651 0.110970776 0.112286956 0.112845319 0.113823573 0.114772330 0.116966937 0.117199302 0.118628689 0.119268824 0.120587751 0.122312821 0.125154081 0.125849212 0.128541443 0.129013219 0.131005060 0.133720087 0.136450732 0.137730513 0.138622543 0.139633126 0.140553667 0.143515754 0.144669638 0.145932107 0.146802971 0.151986804 0.153628348 0.154252874 0.160817624 0.161234079 0.168557505 0.171464547 0.176039188 0.179109575 0.181616449 0.184477914 0.189109920 0.190036649 0.191860336 0.201310397 0.202227578 0.206291368 0.206966634 0.207266703 0.212363718 0.212579593 0.215621926 0.217043373 0.220439377 0.220979186 0.224604883 0.225090611 0.226922571 0.231867943 0.234580108 0.235764155 0.238564700 0.246423793 0.249128271 0.252075426 0.256560942 0.257224920 0.258283469 0.262578998 0.271579593 0.282920338 0.292023831 0.300028470 0.300171197 0.301060721 0.307136794 0.307787398 0.309853085 0.320024330 0.321362075 0.326458026 0.330493356 0.336651939 0.347755794 0.352022911 0.355651741 0.360872630 0.361991883 0.364145132 0.384569870 0.407189243 0.414469599 0.430273367 0.432194057 0.435288224 0.450924679 0.464687105 0.475651603 0.478836179 0.480420946 0.486670976 0.498900709 0.503944469 0.515225165 0.518066465 0.543803701 0.566934564 0.567711248 0.586606327 0.592199451 0.605830368 0.644255846 0.645492932 0.668034262 0.675683228 0.687374583 0.703984529 0.704360361 0.705680797 0.709787519 0.717246115 0.734112780 0.738025376 0.739768798 0.747624401 0.750808925 0.771615633 0.775986794 0.809011790 0.821844347 0.824087968 0.828939006 0.834298569 0.847650212 0.849484746 0.851404578 0.854596473 0.863374549 0.867473330 0.875907436 0.887499747 0.891127869 0.892465124 0.893579302 0.902131456 0.910280776 0.918073312 0.923618866 0.924613008 0.932016059 0.935768844 0.956094961 0.962976641 0.965235351 0.970115048 0.978245678 0.982604703 0.998648786 1.013004943 1.016219770 1.021910579 1.040207014 1.055113524 1.071222060 1.072704899 1.079484061 1.087383570 1.108516841 1.110428428 1.117994292 1.119103700 1.122629390 1.123942579 1.141890423 1.149089853 1.161762135 1.170189425 1.177290113 1.187791405 1.200762603 1.222024329 1.234127395 1.258189503 1.296484867 1.298312657 1.314741873 1.326481405 1.327531164 1.330241750 1.331405179 1.334794710 1.342422482 1.349015079 1.367719405 1.380007932 1.381333767 1.381836715 1.429583545 1.517259456 1.557998071 1.684801181 1.923028370</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">249</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92300922" y3="-0.95410937" z3="-0.67781929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60541937" y3="-1.95091596" z3="-1.5449864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08803882" y3="-0.99641071" z3="-1.40808175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77831848" y3="1.47736688" z3="-1.06473738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29202339" y3="0.31187948" z3="-0.49756656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6577856" y3="2.73604394" z3="-1.15348636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00774766" y3="2.73549609" z3="-0.84957375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38036866" y3="4.99538883" z3="-0.38476139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8102726" y3="3.85131711" z3="-0.8911393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75404341" y3="5.87149787" z3="-0.19095019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09207238" y3="1.60858457" z3="-1.67413804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13329029" y3="0.35978918" z3="0.22242207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71783392" y3="0.38237296" z3="-0.63243422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61443872" y3="0.7315574" z3="0.29696152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66797183" y3="-0.85932724" z3="-1.49475681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09472983" y3="-2.4735775" z3="-1.31745254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0322082" y3="-5.48364453" z3="-6.27176289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76291494" y3="-5.05013814" z3="-5.30434732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05715163" y3="-3.91197599" z3="-2.84799289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73029467" y3="-3.669787" z3="-5.15553751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47128854" y3="-5.87794217" z3="-4.21731257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13286533" y3="-5.30274426" z3="-2.99881726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38647932" y3="-3.06901886" z3="-3.93401051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96475925" y3="-3.0016192" z3="-5.98790818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52109495" y3="-6.96557093" z3="-4.312241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94299618" y3="-5.93674015" z3="-2.12852376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65199165" y3="-3.36496998" z3="-1.60367399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34999743" y3="-3.84776949" z3="-0.86034065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69395821" y3="-4.849316" z3="-1.13181242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38654248" y3="-3.54970433" z3="0.58902666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42492321" y3="-3.08319232" z3="3.34917642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70067565" y3="-4.58587749" z3="1.47717101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11109001" y3="-2.27525586" z3="1.09418104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12733509" y3="-2.04425055" z3="2.46541824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7116527" y3="-4.35459712" z3="2.85144723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89524044" y3="-5.59164781" z3="1.09366851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10298142" y3="-1.43389981" z3="0.43385139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10279725" y3="-1.03879899" z3="2.82799678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92246131" y3="-5.18038179" z3="3.53662389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42682791" y3="-2.90548702" z3="4.4285364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34009508" y3="-1.73318987" z3="-3.9023226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47340571" y3="-1.32950626" z3="-2.99894415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34014692" y3="3.70883378" z3="-1.04878081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13203338" y3="-2.97639311" z3="-1.71105414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92181757" y3="-3.15890963" z3="-0.57159333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11306441" y3="-2.28969666" z3="0.36610959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83918297" y3="-0.72528709" z3="0.63140882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71973574" y3="-0.25963571" z3="-0.94604135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52862513" y3="0.45433741" z3="1.20617366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06252255" y3="-1.06920017" z3="2.00488631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40943405" y3="-4.37025801" z3="-0.34532104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13203766" y3="-4.61466529" z3="0.85192315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02851814" y3="0.03043817" z3="-1.75278679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37623658" y3="0.60895936" z3="-0.7568426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35129134" y3="-1.08872263" z3="-1.31325754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64839831" y3="0.56317395" z3="0.54674675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15134451" y3="0.14800842" z3="2.19743664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00030318" y3="1.44853118" z3="1.31501646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52363037" y3="-0.12358896" z3="2.34304359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8764513" y3="-1.74070819" z3="1.67931139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55854475" y3="-1.52834112" z3="2.87387863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06753706" y3="-4.03205595" z3="0.86694852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52468078" y3="-4.36484331" z3="1.73547489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36374019" y3="-5.68793541" z3="0.83996268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28389409" y3="-2.19539063" z3="-0.16798146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13761681" y3="-3.29225166" z3="-1.0293656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49102766" y3="-4.44963633" z3="-0.61276172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99563035" y3="-4.50516766" z3="0.6844917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14816291" y3="-3.44758222" z3="1.57610551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78570093" y3="-2.29264382" z3="1.14098407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49292242" y3="-3.22112119" z3="-2.06063054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34648364" y3="-5.2893283" z3="-1.29294989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25485329" y3="-5.69176201" z3="1.11477833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74255631" y3="-3.52839622" z3="2.5856416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88229336" y3="-1.44543943" z3="1.82136052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49031649" y3="4.02015771" z3="0.03612649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86093305" y3="3.8058611" z3="-0.02678354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39852643" y3="3.27863402" z3="-1.19586372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60736179" y3="2.99063364" z3="-2.3051918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23730843" y3="3.20382065" z3="-2.22299839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04563861" y3="4.38944439" z3="0.96336003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50987614" y3="4.01887111" z3="0.82337728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83355747" y3="2.98847974" z3="-1.25122471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0663548" y3="2.59035717" z3="-3.20995845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39678023" y3="2.954288" z3="-3.075314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15914861" y3="-5.9025493" z3="2.30288247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76078604" y3="-6.39340146" z3="0.25103996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31496641" y3="2.70073696" z3="-2.32582075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46222313" y3="3.03424197" z3="-0.21050252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62746344" y3="0.16312147" z3="-2.02263245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95133544" y3="1.41010065" z3="-1.88551019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80660734" y3="0.09071173" z3="-2.81464536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2825613" y3="1.19695758" z3="-3.47356625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32223017" y3="-0.87073752" z3="-2.89996816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18696834" y3="1.12895671" z3="-4.08446567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45266657" y3="2.52952719" z3="-2.60728912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58635719" y3="2.4257871" z3="-3.37702091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92092439" y3="3.4815524" z3="-2.5524695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95013334" y3="3.29937342" z3="-3.92530456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58136402" y3="3.90862501" z3="-0.25706427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7619465" y3="5.05977592" z3="-0.06687529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93142538" y3="3.96509016" z3="0.19047716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44848134" y3="5.11310594" z3="0.74102352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56165131" y3="3.07846365" z3="0.09881491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4887153" y3="5.13043608" z3="1.07830855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32960633" y3="6.23765342" z3="0.49286336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64554719" y3="6.2703153" z3="0.88244328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69136747" y3="7.11770623" z3="0.61919029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07072542" y3="7.18001565" z3="1.31534199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34914998" y3="-3.91579672" z3="-2.8806873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53219147" y3="-4.95354748" z3="-2.56270271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22078706" y3="-3.58734784" z3="-3.47808033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47310562" y3="-3.90586503" z3="-3.5483922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69192004" y3="-1.58655893" z3="-2.08486986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42786291" y3="-1.10608375" z3="-2.75477573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52550201" y3="-0.93113456" z3="-1.21563709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74269018" y3="-1.62836213" z3="-2.6430392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.923,-.9541,-.6778;6.6054,-1.9509,-1.545;6.088,-.9964,-1.4081;4.7783,1.4774,-1.0647;4.292,.3119,-.4976;2.6578,2.736,-1.1535;4.0077,2.7355,-.8496;2.3804,4.9954,-.3848;1.8103,3.8513,-.8911;1.754,5.8715,-.191;2.0921,1.6086,-1.6741;3.1333,.3598,.2224;1.7178,.3824,-.6324;.6144,.7316,.297;1.668,-.8593,-1.4948;1.0947,-2.4736,-1.3175;2.0322,-5.4836,-6.2718;1.7629,-5.0501,-5.3043;1.0572,-3.912,-2.848;1.7303,-3.6698,-5.1555;1.4713,-5.8779,-4.2173;1.1329,-5.3027,-2.9988;1.3865,-3.069,-3.934;1.9648,-3.0016,-5.9879;1.5211,-6.9656,-4.3122;.943,-5.9367,-2.1285;.652,-3.365,-1.6037;-.35,-3.8478,-.8603;-.694,-4.8493,-1.1318;-.3865,-3.5497,.589;-.4249,-3.0832,3.3492;-.7007,-4.5859,1.4772;-.1111,-2.2753,1.0942;-.1273,-2.0443,2.4654;-.7117,-4.3546,2.8514;-.8952,-5.5916,1.0937;.103,-1.4339,.4339;.1028,-1.0388,2.828;-.9225,-5.1804,3.5366;-.4268,-2.9055,4.4285;1.3401,-1.7332,-3.9023;1.4734,-1.3295,-2.9989;.3401,3.7088,-1.0488;-2.132,-2.9764,-1.7111;-2.9218,-3.1589,-.5716;-3.1131,-2.2897,.3661;-3.8392,-.7253,.6314;-4.7197,-.2596,-.946;-2.5286,.4543,1.2062;-5.0625,-1.0692,2.0049;-3.4094,-4.3703,-.3453;-4.132,-4.6147,.8519;-4.0285,.0304,-1.7528;-5.3762,.609,-.7568;-5.3513,-1.0887,-1.3133;-1.6484,.5632,.5467;-2.1513,.148,2.1974;-3.0003,1.4485,1.315;-5.5236,-.1236,2.343;-5.8765,-1.7407,1.6793;-4.5585,-1.5283,2.8739;-5.0675,-4.0321,.8669;-3.5247,-4.3648,1.7355;-4.3637,-5.6879,.84;4.2839,-2.1954,-.168;4.1376,-3.2923,-1.0294;3.491,-4.4496,-.6128;2.9956,-4.5052,.6845;3.1482,-3.4476,1.5761;3.7857,-2.2926,1.141;4.4929,-3.2211,-2.0606;3.3465,-5.2893,-1.2929;2.2549,-5.6918,1.1148;2.7426,-3.5284,2.5856;3.8823,-1.4454,1.8214;-.4903,4.0202,.0361;-1.8609,3.8059,-.0268;-2.3985,3.2786,-1.1959;-1.6074,2.9906,-2.3052;-.2373,3.2038,-2.223;-.0456,4.3894,.9634;-2.5099,4.0189,.8234;-3.8336,2.9885,-1.2512;-2.0664,2.5904,-3.21;.3968,2.9543,-3.0753;2.1591,-5.9025,2.3029;1.7608,-6.3934,.251;-4.315,2.7007,-2.3258;-4.4622,3.0342,-.2105;6.6275,.1631,-2.0226;5.9513,1.4101,-1.8855;7.8066,.0907,-2.8146;8.2826,1.197,-3.4736;8.3222,-.8707,-2.9;9.187,1.129,-4.0845;6.4527,2.5295,-2.6073;7.5864,2.4258,-3.377;5.9209,3.4816,-2.5525;7.9501,3.2994,-3.9253;4.5814,3.9086,-.2571;3.7619,5.0598,-.0669;5.9314,3.9651,.1905;6.4485,5.1131,.741;6.5617,3.0785,.0988;7.4887,5.1304,1.0783;4.3296,6.2377,.4929;5.6455,6.2703,.8824;3.6914,7.1177,.6192;6.0707,7.18,1.3153;-2.3491,-3.9158,-2.8807;-2.5322,-4.9535,-2.5627;-3.2208,-3.5873,-3.4781;-1.4731,-3.9059,-3.5484;-1.6919,-1.5866,-2.0849;-2.4279,-1.1061,-2.7548;-1.5255,-.9311,-1.2156;-.7427,-1.6284,-2.643;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928789345</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000809184426 0.000089906708 0.017019723599 0.005374179380</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097599 -0.000178145 0.000074327 0.000181027 0.000302192 0.000361190 0.000407259 0.000508078 0.000648830 0.000826430 0.000963609 0.001013771 0.001171415 0.001275777 0.001411027 0.001443962 0.001653723 0.001810911 0.002001419 0.002318849 0.002520266 0.002767416 0.002912333 0.003327591 0.003567657 0.003685756 0.004123845 0.004595756 0.004844096 0.005049672 0.005126963 0.005324214 0.006094611 0.006436743 0.006554127 0.006928241 0.007151070 0.007528177 0.008179294 0.008710631 0.008868868 0.009549772 0.009879628 0.009985597 0.010986859 0.011190986 0.011898775 0.012571987 0.013380276 0.013797502 0.014060433 0.014623656 0.014968551 0.015461851 0.015888539 0.016617045 0.016889752 0.018594643 0.018977052 0.019434897 0.020297740 0.020449742 0.021574512 0.021862885 0.022491099 0.022787456 0.023496955 0.023825360 0.024519894 0.025898206 0.026640639 0.026900529 0.027210483 0.027543603 0.028312942 0.029073693 0.030928297 0.031539228 0.032135504 0.034105463 0.034666095 0.036032803 0.039049475 0.039528949 0.041984531 0.045406269 0.046133294 0.046808471 0.048881758 0.049696040 0.049911872 0.050832710 0.051537829 0.052189323 0.052288645 0.052412454 0.052960170 0.053614562 0.054924599 0.056106904 0.056431127 0.056727452 0.057017768 0.057271872 0.057757596 0.058596308 0.059245783 0.059720211 0.061366112 0.062108091 0.062915430 0.064234173 0.064566726 0.065059897 0.066015016 0.067509980 0.067948863 0.068989483 0.070529956 0.072136159 0.072617335 0.072932883 0.073081540 0.074924652 0.078746417 0.080872624 0.081714898 0.083352155 0.084549536 0.087826511 0.088981673 0.089413499 0.089850027 0.091319994 0.093334948 0.094578581 0.095494891 0.096233637 0.096859081 0.098505232 0.100141687 0.100697026 0.102740918 0.103878170 0.104317535 0.106581685 0.109149339 0.110973516 0.112287077 0.112846265 0.113823692 0.114772208 0.116967613 0.117201818 0.118628995 0.119268181 0.120587780 0.122313106 0.125154988 0.125849632 0.128541628 0.129013458 0.131006400 0.133720880 0.136450779 0.137730740 0.138623226 0.139634091 0.140553558 0.143515791 0.144669144 0.145932325 0.146805093 0.151987569 0.153630134 0.154253221 0.160818473 0.161234624 0.168557402 0.171464545 0.176041387 0.179110807 0.181618250 0.184479843 0.189110706 0.190041810 0.191860849 0.201311610 0.202227531 0.206291478 0.206966940 0.207266731 0.212364271 0.212579857 0.215624395 0.217043655 0.220440816 0.220979389 0.224606234 0.225090861 0.226923576 0.231868235 0.234580672 0.235769423 0.238564990 0.246423708 0.249129043 0.252087237 0.256561451 0.257225078 0.258283770 0.262579386 0.271579596 0.282920880 0.292023883 0.300031201 0.300171812 0.301060850 0.307137092 0.307787432 0.309853142 0.320029695 0.321362108 0.326458573 0.330503944 0.336652006 0.347756341 0.352023189 0.355651961 0.360878097 0.362004097 0.364145669 0.384571145 0.407191950 0.414470926 0.430274311 0.432194482 0.435288372 0.450925812 0.464687162 0.475651617 0.478836547 0.480421153 0.486670832 0.498900709 0.503945577 0.515226126 0.518067012 0.543805338 0.566935193 0.567712082 0.586606366 0.592200179 0.605833112 0.644262219 0.645494198 0.668034262 0.675683383 0.687374611 0.703987849 0.704361013 0.705682764 0.709790635 0.717246375 0.734118269 0.738025786 0.739768747 0.747625304 0.750809506 0.771615647 0.775986812 0.809013979 0.821844506 0.824089157 0.828939163 0.834299187 0.847662957 0.849487907 0.851404613 0.854597266 0.863376172 0.867473362 0.875908067 0.887500040 0.891127846 0.892467485 0.893585288 0.902131484 0.910282096 0.918073720 0.923622659 0.924613159 0.932016065 0.935769801 0.956100561 0.962977009 0.965235842 0.970115104 0.978247809 0.982604888 0.998648788 1.013005143 1.016221395 1.021910661 1.040207017 1.055113689 1.071222537 1.072706162 1.079484150 1.087383747 1.108517214 1.110428440 1.117994269 1.119103607 1.122629395 1.123942975 1.141890432 1.149092856 1.161762284 1.170189686 1.177290415 1.187804154 1.200762834 1.222031002 1.234129146 1.258190798 1.296484900 1.298314410 1.314742161 1.326481466 1.327532649 1.330243275 1.331405597 1.334794746 1.342426040 1.349023472 1.367769086 1.380008346 1.381334453 1.381839544 1.429583669 1.517261805 1.557998100 1.684801862 1.923031568</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">250</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92314541" y3="-0.9541331" z3="-0.67758744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60674448" y3="-1.95057712" z3="-1.54313371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08951302" y3="-0.99598521" z3="-1.40588993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77965175" y3="1.47772091" z3="-1.06209432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29196513" y3="0.31175245" z3="-0.49716635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65942893" y3="2.73598946" z3="-1.15666721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00832841" y3="2.73554411" z3="-0.84834744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37953608" y3="4.99495916" z3="-0.38796439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81099929" y3="3.85104265" z3="-0.89678281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75246767" y3="5.87119438" z3="-0.19462874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09558501" y3="1.60840519" z3="-1.67888295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13156041" y3="0.35909116" z3="0.2202389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71798475" y3="0.3828388" z3="-0.63784328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61284579" y3="0.73369909" z3="0.28877509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66918882" y3="-0.85915501" z3="-1.49970388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09418897" y3="-2.4730732" z3="-1.32116614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01518848" y3="-5.48489612" z3="-6.27746331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74951646" y3="-5.05108719" z3="-5.30924525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05244508" y3="-3.91216333" z3="-2.85095628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71826401" y3="-3.67075809" z3="-5.16053035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46109864" y3="-5.87847977" z3="-4.22118373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12708899" y3="-5.30292995" z3="-3.00172209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37879907" y3="-3.06961426" z3="-3.93805658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95042636" y3="-3.00293565" z3="-5.99369724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50993032" y3="-6.96610365" z3="-4.31610383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93969225" y3="-5.93661128" z3="-2.13074964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65070655" y3="-3.36485248" z3="-1.60569685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35023227" y3="-3.84663442" z3="-0.86029703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69505828" y3="-4.84827832" z3="-1.13035781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.383805" y3="-3.54742554" z3="0.58901481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41657784" y3="-3.07792795" z3="3.34858441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69475559" y3="-4.58317816" z3="1.4785661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10827179" y3="-2.27247149" z3="1.09267747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12122575" y3="-2.04030406" z3="2.46381302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70216911" y3="-4.35095023" z3="2.85280051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88895177" y3="-5.58986504" z3="1.09647154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10344141" y3="-1.4316534" z3="0.4311931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1085216" y3="-1.03408937" z3="2.82511315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91126443" y3="-5.17588764" z3="3.53838199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41565764" y3="-2.899328" z3="4.42787516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33319325" y3="-1.73377467" z3="-3.90635923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46997748" y3="-1.33023563" z3="-3.00359405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34128915" y3="3.70775539" z3="-1.05753992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13343012" y3="-2.97525932" z3="-1.70853288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92128687" y3="-3.15728534" z3="-0.56774211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11091069" y3="-2.28815889" z3="0.37029064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83878346" y3="-0.72423602" z3="0.6354881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7269323" y3="-0.26376549" z3="-0.93878266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5280464" y3="0.45874985" z3="1.2028253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05569438" y3="-1.06734015" z3="2.01500166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40856182" y3="-4.36827238" z3="-0.34064656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12815623" y3="-4.6131223" z3="0.85829046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03975498" y3="0.0198809" z3="-1.75122991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37923664" y3="0.60794626" z3="-0.74927815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36323254" y3="-1.09284603" z3="-1.29757365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64942523" y3="0.56631089" z3="0.5409709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14793637" y3="0.15606866" z3="2.1940132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00037573" y3="1.45291676" z3="1.30948487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51586" y3="-0.1214984" z3="2.35390129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87070254" y3="-1.73978037" z3="1.69442258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54729558" y3="-1.52512204" z3="2.88214913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06481143" y3="-4.03158679" z3="0.87473739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51896783" y3="-4.36213449" z3="1.74053259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35871106" y3="-5.68690158" z3="0.84732288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28314263" y3="-2.19582057" z3="-0.16997437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13751221" y3="-3.29171533" z3="-1.03295991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49112927" y3="-4.44996307" z3="-0.61818144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99560342" y3="-4.5073569" z3="0.67895358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14710623" y3="-3.45056785" z3="1.57197635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78414384" y3="-2.29462752" z3="1.13855204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49363406" y3="-3.2192759" z3="-2.06386288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34733248" y3="-5.28931183" z3="-1.29947275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25592598" y3="-5.69515989" z3="1.10770197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74107686" y3="-3.53284211" z3="2.58122978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88004783" y3="-1.4480661" z3="1.82004931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49155786" y3="4.02071972" z3="0.02536073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86164646" y3="3.80456041" z3="-0.03910968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39644858" y3="3.27374545" z3="-1.20791764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6028958" y3="2.98383478" z3="-2.31507398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23336684" y3="3.19917829" z3="-2.23131914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04886037" y3="4.39228002" z3="0.95283326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51255724" y3="4.01927678" z3="0.80880059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83100152" y3="2.98168633" z3="-1.26494447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0597394" y3="2.5805477" z3="-3.21953536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4025441" y3="2.94813856" z3="-3.08186866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16147212" y3="-5.90829837" z3="2.29538336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76132266" y3="-6.39534473" z3="0.24318754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30992013" y3="2.68859649" z3="-2.33922775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46182998" y3="3.03140804" z3="-0.22555118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63064431" y3="0.16419949" z3="-2.01774323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95463416" y3="1.41128819" z3="-1.88015219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81154316" y3="0.09253598" z3="-2.8073557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28952108" y3="1.19975749" z3="-3.46319571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32695894" y3="-0.86908365" z3="-2.89327095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19535624" y3="1.13237383" z3="-4.07214176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45810298" y3="2.53178231" z3="-2.59880881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59365225" y3="2.42887465" z3="-3.36598347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92664102" y3="3.48403416" z3="-2.54347929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95918404" y3="3.30336517" z3="-3.91168125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58001539" y3="3.90828356" z3="-0.25323313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75991941" y3="5.05919722" z3="-0.06500656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9284854" y3="3.96442608" z3="0.19899306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44335287" y3="5.11190209" z3="0.75292081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55913663" y3="3.07794466" z3="0.10825873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48237829" y3="5.12902077" z3="1.0938056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32534431" y3="6.23653861" z3="0.49844591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63967114" y3="6.26886151" z3="0.89312405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68663483" y3="7.11632362" z3="0.6232721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06309099" y3="7.17806213" z3="1.32905007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35288382" y3="-3.915174" z3="-2.87753086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53468409" y3="-4.95301113" z3="-2.55888241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22591806" y3="-3.58698482" z3="-3.47256783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47860491" y3="-3.90483076" z3="-3.54760484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69320704" y3="-1.58595484" z3="-2.08343118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42935298" y3="-1.1058635" z3="-2.75371976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52701948" y3="-0.93012422" z3="-1.21455875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74473467" y3="-1.62789765" z3="-2.6423298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9231,-.9541,-.6776;6.6067,-1.9506,-1.5431;6.0895,-.996,-1.4059;4.7797,1.4777,-1.0621;4.292,.3118,-.4972;2.6594,2.736,-1.1567;4.0083,2.7355,-.8483;2.3795,4.995,-.388;1.811,3.851,-.8968;1.7525,5.8712,-.1946;2.0956,1.6084,-1.6789;3.1316,.3591,.2202;1.718,.3828,-.6378;.6128,.7337,.2888;1.6692,-.8592,-1.4997;1.0942,-2.4731,-1.3212;2.0152,-5.4849,-6.2775;1.7495,-5.0511,-5.3092;1.0524,-3.9122,-2.851;1.7183,-3.6708,-5.1605;1.4611,-5.8785,-4.2212;1.1271,-5.3029,-3.0017;1.3788,-3.0696,-3.9381;1.9504,-3.0029,-5.9937;1.5099,-6.9661,-4.3161;.9397,-5.9366,-2.1307;.6507,-3.3649,-1.6057;-.3502,-3.8466,-.8603;-.6951,-4.8483,-1.1304;-.3838,-3.5474,.589;-.4166,-3.0779,3.3486;-.6948,-4.5832,1.4786;-.1083,-2.2725,1.0927;-.1212,-2.0403,2.4638;-.7022,-4.351,2.8528;-.889,-5.5899,1.0965;.1034,-1.4317,.4312;.1085,-1.0341,2.8251;-.9113,-5.1759,3.5384;-.4157,-2.8993,4.4279;1.3332,-1.7338,-3.9064;1.47,-1.3302,-3.0036;.3413,3.7078,-1.0575;-2.1334,-2.9753,-1.7085;-2.9213,-3.1573,-.5677;-3.1109,-2.2882,.3703;-3.8388,-.7242,.6355;-4.7269,-.2638,-.9388;-2.528,.4587,1.2028;-5.0557,-1.0673,2.015;-3.4086,-4.3683,-.3406;-4.1282,-4.6131,.8583;-4.0398,.0199,-1.7512;-5.3792,.6079,-.7493;-5.3632,-1.0928,-1.2976;-1.6494,.5663,.541;-2.1479,.1561,2.194;-3.0004,1.4529,1.3095;-5.5159,-.1215,2.3539;-5.8707,-1.7398,1.6944;-4.5473,-1.5251,2.8821;-5.0648,-4.0316,.8747;-3.519,-4.3621,1.7405;-4.3587,-5.6869,.8473;4.2831,-2.1958,-.17;4.1375,-3.2917,-1.033;3.4911,-4.45,-.6182;2.9956,-4.5074,.679;3.1471,-3.4506,1.572;3.7841,-2.2946,1.1386;4.4936,-3.2193,-2.0639;3.3473,-5.2893,-1.2995;2.2559,-5.6952,1.1077;2.7411,-3.5328,2.5812;3.88,-1.4481,1.82;-.4916,4.0207,.0254;-1.8616,3.8046,-.0391;-2.3964,3.2737,-1.2079;-1.6029,2.9838,-2.3151;-.2334,3.1992,-2.2313;-.0489,4.3923,.9528;-2.5126,4.0193,.8088;-3.831,2.9817,-1.2649;-2.0597,2.5805,-3.2195;.4025,2.9481,-3.0819;2.1615,-5.9083,2.2954;1.7613,-6.3953,.2432;-4.3099,2.6886,-2.3392;-4.4618,3.0314,-.2256;6.6306,.1642,-2.0177;5.9546,1.4113,-1.8802;7.8115,.0925,-2.8074;8.2895,1.1998,-3.4632;8.327,-.8691,-2.8933;9.1954,1.1324,-4.0721;6.4581,2.5318,-2.5988;7.5937,2.4289,-3.366;5.9266,3.484,-2.5435;7.9592,3.3034,-3.9117;4.58,3.9083,-.2532;3.7599,5.0592,-.065;5.9285,3.9644,.199;6.4434,5.1119,.7529;6.5591,3.0779,.1083;7.4824,5.129,1.0938;4.3253,6.2365,.4984;5.6397,6.2689,.8931;3.6866,7.1163,.6233;6.0631,7.1781,1.3291;-2.3529,-3.9152,-2.8775;-2.5347,-4.953,-2.5589;-3.2259,-3.587,-3.4726;-1.4786,-3.9048,-3.5476;-1.6932,-1.586,-2.0834;-2.4294,-1.1059,-2.7537;-1.527,-.9301,-1.2146;-.7447,-1.6279,-2.6423;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928577432</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001097445446 0.000124968061 0.022663802218 0.005342200823</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057094522 -0.000033381 0.000038194 0.000181281 0.000283344 0.000339973 0.000407853 0.000512899 0.000650997 0.000827403 0.000971312 0.001013385 0.001173678 0.001274871 0.001412327 0.001454138 0.001654135 0.001804764 0.002003714 0.002317430 0.002524030 0.002766951 0.002912849 0.003318500 0.003563512 0.003680559 0.004111908 0.004590870 0.004844290 0.005048992 0.005139926 0.005324571 0.006095459 0.006438948 0.006551695 0.006920686 0.007148281 0.007524711 0.008180574 0.008713360 0.008868592 0.009550165 0.009878354 0.009981402 0.010989069 0.011190439 0.011898057 0.012572865 0.013380709 0.013797842 0.014059839 0.014624895 0.014966614 0.015461727 0.015889786 0.016617370 0.016884532 0.018594748 0.018977621 0.019434863 0.020294345 0.020446043 0.021575558 0.021861877 0.022491798 0.022788585 0.023496879 0.023825447 0.024519674 0.025898559 0.026641562 0.026900779 0.027209984 0.027541836 0.028318209 0.029073634 0.030929344 0.031539953 0.032133657 0.034105628 0.034666769 0.036033722 0.039048761 0.039527967 0.041984318 0.045407305 0.046134459 0.046805525 0.048883256 0.049696017 0.049911868 0.050833378 0.051537860 0.052189189 0.052288659 0.052412489 0.052966602 0.053616639 0.054923815 0.056107626 0.056432322 0.056727265 0.057017067 0.057265977 0.057756215 0.058596460 0.059245815 0.059719688 0.061366867 0.062111589 0.062914294 0.064234437 0.064567431 0.065060634 0.066015526 0.067510492 0.067947274 0.068990439 0.070530157 0.072135485 0.072614520 0.072934387 0.073057022 0.074918299 0.078748296 0.080873872 0.081715789 0.083352175 0.084548498 0.087818211 0.088979784 0.089415705 0.089850506 0.091320323 0.093335608 0.094578629 0.095495340 0.096236305 0.096859085 0.098505283 0.100142300 0.100698505 0.102743510 0.103882830 0.104318694 0.106583361 0.109157332 0.110977000 0.112287436 0.112846848 0.113821473 0.114772080 0.116967710 0.117202732 0.118630288 0.119266949 0.120588183 0.122314083 0.125152458 0.125852460 0.128542923 0.129013306 0.131008322 0.133725583 0.136454828 0.137729539 0.138623105 0.139637640 0.140553850 0.143515380 0.144667722 0.145931821 0.146806733 0.151989397 0.153630810 0.154250767 0.160816776 0.161232033 0.168558044 0.171464991 0.176045239 0.179110212 0.181622674 0.184480508 0.189110826 0.190053780 0.191858367 0.201312165 0.202227742 0.206291178 0.206966968 0.207266777 0.212365825 0.212580190 0.215625270 0.217040237 0.220441619 0.220977703 0.224609659 0.225091062 0.226926597 0.231869211 0.234583023 0.235792802 0.238565657 0.246422331 0.249124727 0.252115146 0.256562406 0.257225328 0.258283809 0.262580473 0.271579608 0.282922635 0.292023983 0.300035985 0.300173153 0.301061356 0.307137454 0.307787487 0.309854147 0.320036047 0.321362059 0.326459167 0.330543992 0.336652678 0.347756607 0.352023568 0.355652200 0.360881849 0.362028538 0.364146648 0.384572449 0.407198753 0.414471731 0.430275952 0.432195021 0.435289657 0.450929091 0.464687638 0.475653286 0.478837237 0.480422401 0.486671126 0.498900821 0.503946405 0.515226486 0.518069860 0.543808052 0.566936100 0.567713615 0.586606647 0.592202214 0.605842078 0.644266702 0.645499576 0.668034511 0.675683937 0.687374938 0.703993222 0.704362309 0.705672880 0.709792020 0.717247722 0.734130032 0.738027227 0.739768464 0.747628446 0.750811159 0.771615770 0.775986854 0.809016983 0.821844946 0.824091856 0.828939830 0.834300045 0.847698596 0.849496694 0.851404435 0.854598397 0.863380980 0.867473364 0.875910668 0.887501717 0.891127263 0.892467250 0.893595927 0.902131228 0.910286530 0.918073045 0.923612854 0.924612589 0.932016052 0.935773575 0.956104414 0.962978988 0.965238981 0.970115090 0.978249859 0.982605168 0.998648938 1.013008932 1.016225750 1.021910788 1.040207052 1.055114692 1.071222304 1.072709123 1.079484176 1.087384006 1.108517519 1.110428470 1.117999061 1.119105283 1.122629612 1.123945069 1.141890442 1.149107356 1.161762480 1.170190280 1.177291284 1.187848410 1.200763367 1.222042567 1.234132362 1.258194028 1.296485457 1.298316646 1.314742347 1.326481470 1.327531881 1.330244683 1.331406807 1.334795116 1.342433142 1.349060464 1.367904066 1.380008941 1.381336022 1.381844374 1.429584115 1.517262949 1.557998189 1.684803461 1.923029831</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">251</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92144767" y3="-0.95537472" z3="-0.6792271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60743153" y3="-1.95066545" z3="-1.54112885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08978574" y3="-0.99629037" z3="-1.40424972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7792748" y3="1.4770291" z3="-1.06058023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28986375" y3="0.31023027" z3="-0.49878594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65949007" y3="2.73595754" z3="-1.15822448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00771126" y3="2.73475245" z3="-0.84665534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37780554" y3="4.99383555" z3="-0.38666715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81032196" y3="3.85062337" z3="-0.89810411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75052456" y3="5.86966961" z3="-0.19493107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09697826" y3="1.60926648" z3="-1.68420953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12760478" y3="0.35641307" z3="0.21568206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71627824" y3="0.38218068" z3="-0.64592955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60915565" y3="0.73254217" z3="0.27868292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66871947" y3="-0.85856062" z3="-1.50969844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0924478" y3="-2.47116541" z3="-1.32608819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00530916" y3="-5.48892853" z3="-6.28066867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74117485" y3="-5.05382614" z3="-5.31254382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04803826" y3="-3.91171042" z3="-2.85448572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70788883" y3="-3.67314024" z3="-5.16618821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45683643" y3="-5.87989782" z3="-4.22228554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12461561" y3="-5.30273334" z3="-3.00300077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37051141" y3="-3.07045268" z3="-3.94383989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93681995" y3="-3.00629402" z3="-6.00113843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50739313" y3="-6.96771147" z3="-4.31540501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94023754" y3="-5.93528907" z3="-2.13048809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64813431" y3="-3.3627611" z3="-1.60926032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35060698" y3="-3.8448948" z3="-0.8610073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6950271" y3="-4.84712161" z3="-1.12928616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38081098" y3="-3.54451022" z3="0.58808871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40340879" y3="-3.07378934" z3="3.34771789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68382121" y3="-4.58080804" z3="1.47981368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10905466" y3="-2.2677451" z3="1.08947598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11757913" y3="-2.03456176" z3="2.46036825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68691244" y3="-4.34732186" z3="2.85378811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87565263" y3="-5.58825316" z3="1.09919181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09597337" y3="-1.42610356" z3="0.42657136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10968939" y3="-1.02737726" z3="2.81996243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88860062" y3="-5.17319191" z3="3.54160673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39917034" y3="-2.89427003" z3="4.42674529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.322927" y3="-1.73452643" z3="-3.91414273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46226757" y3="-1.32963746" z3="-3.01218681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34095698" y3="3.70774094" z3="-1.06186281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13688257" y3="-2.97681715" z3="-1.70654633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92124097" y3="-3.15737368" z3="-0.56297912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11022829" y3="-2.28563366" z3="0.37277942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83799912" y3="-0.7215554" z3="0.63599381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7281435" y3="-0.26223736" z3="-0.9378723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52707602" y3="0.46259216" z3="1.2006883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05310508" y3="-1.06337799" z3="2.0173859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40504456" y3="-4.36910102" z3="-0.33036784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11906737" y3="-4.6117949" z3="0.87240871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04231426" y3="0.01709519" z3="-1.75313098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37656856" y3="0.61262701" z3="-0.74861549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36920414" y3="-1.08953965" z3="-1.29284088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64834063" y3="0.56900585" z3="0.53886408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14719379" y3="0.16190572" z3="2.19272567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99952838" y3="1.45687752" z3="1.30552534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51192764" y3="-0.11738526" z3="2.3576631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86917174" y3="-1.73511822" z3="1.6978787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54356656" y3="-1.5217131" z3="2.88360216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05460933" y3="-4.02934937" z3="0.89346332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50521043" y3="-4.36047084" z3="1.75106447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35057674" y3="-5.6851433" z3="0.86384698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28089695" y3="-2.1976519" z3="-0.17367519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13545423" y3="-3.29246916" z3="-1.03779145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49036419" y3="-4.45167468" z3="-0.62376928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9962041" y3="-4.51116981" z3="0.67382724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14682066" y3="-3.45515011" z3="1.56761787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78220479" y3="-2.29811446" z3="1.13480607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49090109" y3="-3.21839787" z3="-2.06879433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34658024" y3="-5.28999968" z3="-1.30586943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25943843" y3="-5.70081703" z3="1.10255275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74168161" y3="-3.53894745" z3="2.57711405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87746159" y3="-1.45207921" z3="1.81688424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49370751" y3="4.02136703" z3="0.01913963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86382529" y3="3.80586312" z3="-0.04813414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39678176" y3="3.27460233" z3="-1.21748119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60149371" y3="2.98455665" z3="-2.32330083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23200085" y3="3.19959517" z3="-2.23701509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05272191" y3="4.39321444" z3="0.94711125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51594514" y3="4.02069206" z3="0.79912658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83123397" y3="2.98244115" z3="-1.27653144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05687835" y3="2.58125562" z3="-3.22853705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40527616" y3="2.9483127" z3="-3.08633581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16775417" y3="-5.91560254" z3="2.29027913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7643799" y3="-6.40092701" z3="0.23813876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30840319" y3="2.68771875" z3="-2.35115665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46379812" y3="3.03402741" z3="-0.23836333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63270205" y3="0.16474163" z3="-2.01292026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95644691" y3="1.41163282" z3="-1.87553752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81591297" y3="0.09418142" z3="-2.79901228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29587947" y3="1.20224571" z3="-3.45198543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33156391" y3="-0.86723798" z3="-2.88452398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20351638" y3="1.13571785" z3="-4.05824694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46201103" y3="2.53300732" z3="-2.59135505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59972812" y3="2.43109845" z3="-3.35538662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93037463" y3="3.48508362" z3="-2.53659303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96680918" y3="3.30619937" z3="-3.8990622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57798034" y3="3.90650939" z3="-0.24818314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75757904" y3="5.05743456" z3="-0.06064502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92527296" y3="3.96168358" z3="0.20788704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43905287" y3="5.10836358" z3="0.76438673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55585062" y3="3.07508786" z3="0.11806902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47708369" y3="5.12472712" z3="1.10846753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32205751" y3="6.23402606" z3="0.50506948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63553186" y3="6.26546345" z3="0.90314022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68325959" y3="7.11396336" z3="0.62915898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05818367" y3="7.17410712" z3="1.34077368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35783616" y3="-3.91989271" z3="-2.87249667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53843329" y3="-4.95684538" z3="-2.55061714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23228623" y3="-3.59415186" z3="-3.46716373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48463436" y3="-3.91108066" z3="-3.54392886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69975326" y3="-1.58763154" z3="-2.08616113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43740363" y3="-1.11083217" z3="-2.75676061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5332243" y3="-0.92858778" z3="-1.2197294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75116093" y3="-1.62981302" z3="-2.64548759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9214,-.9554,-.6792;6.6074,-1.9507,-1.5411;6.0898,-.9963,-1.4042;4.7793,1.477,-1.0606;4.2899,.3102,-.4988;2.6595,2.736,-1.1582;4.0077,2.7348,-.8467;2.3778,4.9938,-.3867;1.8103,3.8506,-.8981;1.7505,5.8697,-.1949;2.097,1.6093,-1.6842;3.1276,.3564,.2157;1.7163,.3822,-.6459;.6092,.7325,.2787;1.6687,-.8586,-1.5097;1.0924,-2.4712,-1.3261;2.0053,-5.4889,-6.2807;1.7412,-5.0538,-5.3125;1.048,-3.9117,-2.8545;1.7079,-3.6731,-5.1662;1.4568,-5.8799,-4.2223;1.1246,-5.3027,-3.003;1.3705,-3.0705,-3.9438;1.9368,-3.0063,-6.0011;1.5074,-6.9677,-4.3154;.9402,-5.9353,-2.1305;.6481,-3.3628,-1.6093;-.3506,-3.8449,-.861;-.695,-4.8471,-1.1293;-.3808,-3.5445,.5881;-.4034,-3.0738,3.3477;-.6838,-4.5808,1.4798;-.1091,-2.2677,1.0895;-.1176,-2.0346,2.4604;-.6869,-4.3473,2.8538;-.8757,-5.5883,1.0992;.096,-1.4261,.4266;.1097,-1.0274,2.82;-.8886,-5.1732,3.5416;-.3992,-2.8943,4.4267;1.3229,-1.7345,-3.9141;1.4623,-1.3296,-3.0122;.341,3.7077,-1.0619;-2.1369,-2.9768,-1.7065;-2.9212,-3.1574,-.563;-3.1102,-2.2856,.3728;-3.838,-.7216,.636;-4.7281,-.2622,-.9379;-2.5271,.4626,1.2007;-5.0531,-1.0634,2.0174;-3.405,-4.3691,-.3304;-4.1191,-4.6118,.8724;-4.0423,.0171,-1.7531;-5.3766,.6126,-.7486;-5.3692,-1.0895,-1.2928;-1.6483,.569,.5389;-2.1472,.1619,2.1927;-2.9995,1.4569,1.3055;-5.5119,-.1174,2.3577;-5.8692,-1.7351,1.6979;-4.5436,-1.5217,2.8836;-5.0546,-4.0293,.8935;-3.5052,-4.3605,1.7511;-4.3506,-5.6851,.8638;4.2809,-2.1977,-.1737;4.1355,-3.2925,-1.0378;3.4904,-4.4517,-.6238;2.9962,-4.5112,.6738;3.1468,-3.4552,1.5676;3.7822,-2.2981,1.1348;4.4909,-3.2184,-2.0688;3.3466,-5.29,-1.3059;2.2594,-5.7008,1.1026;2.7417,-3.5389,2.5771;3.8775,-1.4521,1.8169;-.4937,4.0214,.0191;-1.8638,3.8059,-.0481;-2.3968,3.2746,-1.2175;-1.6015,2.9846,-2.3233;-.232,3.1996,-2.237;-.0527,4.3932,.9471;-2.5159,4.0207,.7991;-3.8312,2.9824,-1.2765;-2.0569,2.5813,-3.2285;.4053,2.9483,-3.0863;2.1678,-5.9156,2.2903;1.7644,-6.4009,.2381;-4.3084,2.6877,-2.3512;-4.4638,3.034,-.2384;6.6327,.1647,-2.0129;5.9564,1.4116,-1.8755;7.8159,.0942,-2.799;8.2959,1.2022,-3.452;8.3316,-.8672,-2.8845;9.2035,1.1357,-4.0582;6.462,2.533,-2.5914;7.5997,2.4311,-3.3554;5.9304,3.4851,-2.5366;7.9668,3.3062,-3.8991;4.578,3.9065,-.2482;3.7576,5.0574,-.0606;5.9253,3.9617,.2079;6.4391,5.1084,.7644;6.5559,3.0751,.1181;7.4771,5.1247,1.1085;4.3221,6.234,.5051;5.6355,6.2655,.9031;3.6833,7.114,.6292;6.0582,7.1741,1.3408;-2.3578,-3.9199,-2.8725;-2.5384,-4.9568,-2.5506;-3.2323,-3.5942,-3.4672;-1.4846,-3.9111,-3.5439;-1.6998,-1.5876,-2.0862;-2.4374,-1.1108,-2.7568;-1.5332,-.9286,-1.2197;-.7512,-1.6298,-2.6455;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928604204</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000824217303 0.000106247428 0.016920109915 0.005166477502</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057096684 -0.000098795 0.000050097 0.000110669 0.000298378 0.000377865 0.000407609 0.000513097 0.000651752 0.000830855 0.000962461 0.001013090 0.001178341 0.001276425 0.001414550 0.001463938 0.001654643 0.001804347 0.002008252 0.002317837 0.002536027 0.002767190 0.002913377 0.003314539 0.003563666 0.003682728 0.004110553 0.004590423 0.004845269 0.005048404 0.005138882 0.005322890 0.006095705 0.006439385 0.006551412 0.006922146 0.007149166 0.007524582 0.008179456 0.008715719 0.008868732 0.009553032 0.009877553 0.009982864 0.010991136 0.011190747 0.011898993 0.012573578 0.013379776 0.013799478 0.014059830 0.014625054 0.014966935 0.015462479 0.015890348 0.016617147 0.016892123 0.018594401 0.018976778 0.019433358 0.020292291 0.020445118 0.021575098 0.021862263 0.022491889 0.022788325 0.023496920 0.023825538 0.024519677 0.025898984 0.026642804 0.026902276 0.027210864 0.027541809 0.028318749 0.029073812 0.030929408 0.031540653 0.032095052 0.034105268 0.034667499 0.036034959 0.039049568 0.039529727 0.041984172 0.045408865 0.046133961 0.046805811 0.048884365 0.049696036 0.049912097 0.050833460 0.051537999 0.052189426 0.052288659 0.052412586 0.052968937 0.053618329 0.054923319 0.056108125 0.056432623 0.056727113 0.057016798 0.057257952 0.057756579 0.058598004 0.059245948 0.059720461 0.061366612 0.062112871 0.062914418 0.064234680 0.064568017 0.065061894 0.066015577 0.067509916 0.067947322 0.068991311 0.070529309 0.072135277 0.072614363 0.072937587 0.073056737 0.074907793 0.078747761 0.080872784 0.081717340 0.083352202 0.084546073 0.087774638 0.088975713 0.089417217 0.089849981 0.091320254 0.093335326 0.094579171 0.095495521 0.096236848 0.096859103 0.098506463 0.100144802 0.100699567 0.102745169 0.103888006 0.104319109 0.106583117 0.109163024 0.110979943 0.112287554 0.112846505 0.113821686 0.114770233 0.116969425 0.117202749 0.118631998 0.119266004 0.120588908 0.122314358 0.125153238 0.125853117 0.128543034 0.129013631 0.131007330 0.133729665 0.136455154 0.137729048 0.138622644 0.139641461 0.140553765 0.143515081 0.144666954 0.145931703 0.146807420 0.151991439 0.153631281 0.154250624 0.160811108 0.161212850 0.168557605 0.171464805 0.176046802 0.179110468 0.181624374 0.184481816 0.189110948 0.190066426 0.191857164 0.201312406 0.202227579 0.206290951 0.206967080 0.207266789 0.212367382 0.212580612 0.215626407 0.217038777 0.220440991 0.220978661 0.224610589 0.225091344 0.226927953 0.231869951 0.234584629 0.235811875 0.238565879 0.246422323 0.249118945 0.252148789 0.256562309 0.257225305 0.258283906 0.262580942 0.271579618 0.282922794 0.292023971 0.300037007 0.300173270 0.301061537 0.307137387 0.307787477 0.309853778 0.320049972 0.321362132 0.326459667 0.330559404 0.336652216 0.347758210 0.352024078 0.355652443 0.360882395 0.362036813 0.364147506 0.384572765 0.407201529 0.414473578 0.430277538 0.432182473 0.435286565 0.450932026 0.464688154 0.475648247 0.478837543 0.480423460 0.486665070 0.498900851 0.503946181 0.515227086 0.518067939 0.543811885 0.566937598 0.567714729 0.586606966 0.592198620 0.605845931 0.644270773 0.645504998 0.668034510 0.675683065 0.687374518 0.703996943 0.704362716 0.705668379 0.709797253 0.717249120 0.734135142 0.738027850 0.739769022 0.747617077 0.750813231 0.771615762 0.775986917 0.809015861 0.821845450 0.824093493 0.828940402 0.834300710 0.847721317 0.849501166 0.851404506 0.854599289 0.863385546 0.867473404 0.875912726 0.887503483 0.891127222 0.892468455 0.893594557 0.902131279 0.910290561 0.918071837 0.923608350 0.924612204 0.932016047 0.935774403 0.956106687 0.962976943 0.965239360 0.970114076 0.978235290 0.982604825 0.998649287 1.013007431 1.016226775 1.021910875 1.040207308 1.055115459 1.071222203 1.072709190 1.079484122 1.087384040 1.108517589 1.110428467 1.118003653 1.119106575 1.122629862 1.123947170 1.141890461 1.149121816 1.161762513 1.170190665 1.177291272 1.187876589 1.200763632 1.222045257 1.234135197 1.258195939 1.296485425 1.298316795 1.314742390 1.326481429 1.327532276 1.330246641 1.331408543 1.334794907 1.342437147 1.349081872 1.367955808 1.380009160 1.381336778 1.381847146 1.429584339 1.517251514 1.557998125 1.684804027 1.923022685</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">252</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92393087" y3="-0.95568291" z3="-0.67996244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61066618" y3="-1.94857639" z3="-1.54329402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0923896" y3="-0.99471985" z3="-1.40495797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77963074" y3="1.47702631" z3="-1.05806972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29107109" y3="0.3090748" z3="-0.49807305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65868146" y3="2.73343747" z3="-1.15798933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00628807" y3="2.73353216" z3="-0.84400106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3738983" y3="4.99046532" z3="-0.38607858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80816383" y3="3.84718363" z3="-0.89955994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74544815" y3="5.86605869" z3="-0.19364141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09835745" y3="1.60619967" z3="-1.68483939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12821296" y3="0.35326338" z3="0.21557635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71753809" y3="0.37875377" z3="-0.64710459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.609631" y3="0.72914102" z3="0.27650771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67109984" y3="-0.8620391" z3="-1.51077651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0936225" y3="-2.47516878" z3="-1.32727122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99025399" y3="-5.49327876" z3="-6.28497994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72950073" y3="-5.05809853" z3="-5.31599638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04464544" y3="-3.91572071" z3="-2.85575099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69993654" y3="-3.6775855" z3="-5.16878808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44577097" y3="-5.88396777" z3="-4.22548471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11782687" y3="-5.30671666" z3="-3.00514996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36665373" y3="-3.07472703" z3="-3.94539637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92861845" y3="-3.01094123" z3="-6.00390994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49347752" y3="-6.97172938" z3="-4.31928651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93417077" y3="-5.93921764" z3="-2.13250271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64823862" y3="-3.36688971" z3="-1.60929951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35045376" y3="-3.84700431" z3="-0.86007814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69714372" y3="-4.84855013" z3="-1.12814573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37825657" y3="-3.54691347" z3="0.58929359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.3949044" y3="-3.07767776" z3="3.34914838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67967931" y3="-4.58377704" z3="1.48087854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1046894" y3="-2.27092683" z3="1.09109982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10980303" y3="-2.03883955" z3="2.46234956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67880817" y3="-4.35177284" z3="2.8552729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87287664" y3="-5.59093592" z3="1.09999081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0991578" y3="-1.42911838" z3="0.42835612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11821464" y3="-1.03170619" z3="2.82220938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87997958" y3="-5.17761536" z3="3.54221698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.3873919" y3="-2.89916058" z3="4.42849326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32226977" y3="-1.73877822" z3="-3.91506044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46352216" y3="-1.33445858" z3="-3.0133842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33908051" y3="3.70419373" z3="-1.06618861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13670773" y3="-2.97552749" z3="-1.7039234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9196164" y3="-3.15223409" z3="-0.55892351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10543325" y3="-2.27842754" z3="0.37560172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83485049" y3="-0.71448317" z3="0.63542874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72522161" y3="-0.25963038" z3="-0.93917949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52382757" y3="0.4706529" z3="1.19749902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05040765" y3="-1.05248272" z3="2.01755584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40603411" y3="-4.36199614" z3="-0.32392799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11795032" y3="-4.60132737" z3="0.88067524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03939177" y3="0.01583202" z3="-1.75548603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37267189" y3="0.61630672" z3="-0.75233672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36669754" y3="-1.08768918" z3="-1.29095129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64588459" y3="0.57560873" z3="0.53430787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14247252" y3="0.17129044" z3="2.18931619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99616365" y3="1.46511348" z3="1.30140772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50948677" y3="-0.10518324" z3="2.35398268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86640432" y3="-1.72546925" z3="1.70026262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54087092" y3="-1.50750449" z3="2.88546586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05330998" y3="-4.01810221" z3="0.90153838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50250915" y3="-4.34829964" z3="1.75798724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35020687" y3="-5.67478495" z3="0.87502913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28413007" y3="-2.19898974" z3="-0.17603691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13771445" y3="-3.29233097" z3="-1.04204933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49281732" y3="-4.452214" z3="-0.62949298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00013631" y3="-4.51390896" z3="0.66857633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15190045" y3="-3.45945071" z3="1.56421283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78693416" y3="-2.30166375" z3="1.13282221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49226628" y3="-3.2165033" z3="-2.0732522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34819966" y3="-5.28956484" z3="-1.31293916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26351257" y3="-5.70402949" z3="1.09589172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7479107" y3="-3.54504569" z3="2.57402102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88311023" y3="-1.45677367" z3="1.8163838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49837817" y3="4.02484175" z3="0.01110341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86849372" y3="3.81025986" z3="-0.05827103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39874588" y3="3.27306988" z3="-1.2262442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60058217" y3="2.9753943" z3="-2.32808664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23104749" y3="3.18923157" z3="-2.23946058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05955801" y3="4.40143381" z3="0.93840003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52301097" y3="4.03104507" z3="0.78536292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83335785" y3="2.98231753" z3="-1.28740129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05385141" y3="2.56715954" z3="-3.2321728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40868579" y3="2.93139259" z3="-3.08507358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17280403" y3="-5.92074636" z3="2.28324567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76753886" y3="-6.402502" z3="0.23077844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30870715" y3="2.68563067" z3="-2.36227353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46781548" y3="3.03672887" z3="-0.25042474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63463704" y3="0.16770093" z3="-2.01162707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95743847" y3="1.41393401" z3="-1.87228091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81811605" y3="0.09931456" z3="-2.7975875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2975986" y3="1.20894924" z3="-3.44825467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33440216" y3="-0.86168676" z3="-2.88487977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20544975" y3="1.14408846" z3="-4.05441759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46264879" y3="2.53707403" z3="-2.58557448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60075729" y3="2.43734162" z3="-3.34931573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93048875" y3="3.48884677" z3="-2.5289093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96758887" y3="3.31383649" z3="-3.89092178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57446664" y3="3.90522266" z3="-0.24361257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7526043" y3="5.05500453" z3="-0.05648085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92078525" y3="3.96132587" z3="0.21493985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43199423" y3="5.10774879" z3="0.77439605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55262718" y3="3.07564763" z3="0.12469293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46936812" y3="5.12485376" z3="1.12031106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31428828" y3="6.23136227" z3="0.51273238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62661047" y3="6.26366951" z3="0.91395347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67418516" y3="7.11029628" z3="0.63693078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04709573" y3="7.17202024" z3="1.35446704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36192701" y3="-3.92010387" z3="-2.86799877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54525014" y3="-4.95596966" z3="-2.54387211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23615782" y3="-3.59263501" z3="-3.46173873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4897018" y3="-3.91486755" z3="-3.54083182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69648315" y3="-1.58827196" z3="-2.08622119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43368991" y3="-1.11105539" z3="-2.75740108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52805374" y3="-0.92829937" z3="-1.22092135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74919989" y3="-1.63316081" z3="-2.64693674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9239,-.9557,-.68;6.6107,-1.9486,-1.5433;6.0924,-.9947,-1.405;4.7796,1.477,-1.0581;4.2911,.3091,-.4981;2.6587,2.7334,-1.158;4.0063,2.7335,-.844;2.3739,4.9905,-.3861;1.8082,3.8472,-.8996;1.7454,5.8661,-.1936;2.0984,1.6062,-1.6848;3.1282,.3533,.2156;1.7175,.3788,-.6471;.6096,.7291,.2765;1.6711,-.862,-1.5108;1.0936,-2.4752,-1.3273;1.9903,-5.4933,-6.285;1.7295,-5.0581,-5.316;1.0446,-3.9157,-2.8558;1.6999,-3.6776,-5.1688;1.4458,-5.884,-4.2255;1.1178,-5.3067,-3.0051;1.3667,-3.0747,-3.9454;1.9286,-3.0109,-6.0039;1.4935,-6.9717,-4.3193;.9342,-5.9392,-2.1325;.6482,-3.3669,-1.6093;-.3505,-3.847,-.8601;-.6971,-4.8486,-1.1281;-.3783,-3.5469,.5893;-.3949,-3.0777,3.3491;-.6797,-4.5838,1.4809;-.1047,-2.2709,1.0911;-.1098,-2.0388,2.4623;-.6788,-4.3518,2.8553;-.8729,-5.5909,1.1;.0992,-1.4291,.4284;.1182,-1.0317,2.8222;-.88,-5.1776,3.5422;-.3874,-2.8992,4.4285;1.3223,-1.7388,-3.9151;1.4635,-1.3345,-3.0134;.3391,3.7042,-1.0662;-2.1367,-2.9755,-1.7039;-2.9196,-3.1522,-.5589;-3.1054,-2.2784,.3756;-3.8349,-.7145,.6354;-4.7252,-.2596,-.9392;-2.5238,.4707,1.1975;-5.0504,-1.0525,2.0176;-3.406,-4.362,-.3239;-4.118,-4.6013,.8807;-4.0394,.0158,-1.7555;-5.3727,.6163,-.7523;-5.3667,-1.0877,-1.291;-1.6459,.5756,.5343;-2.1425,.1713,2.1893;-2.9962,1.4651,1.3014;-5.5095,-.1052,2.354;-5.8664,-1.7255,1.7003;-4.5409,-1.5075,2.8855;-5.0533,-4.0181,.9015;-3.5025,-4.3483,1.758;-4.3502,-5.6748,.875;4.2841,-2.199,-.176;4.1377,-3.2923,-1.042;3.4928,-4.4522,-.6295;3.0001,-4.5139,.6686;3.1519,-3.4595,1.5642;3.7869,-2.3017,1.1328;4.4923,-3.2165,-2.0733;3.3482,-5.2896,-1.3129;2.2635,-5.704,1.0959;2.7479,-3.545,2.574;3.8831,-1.4568,1.8164;-.4984,4.0248,.0111;-1.8685,3.8103,-.0583;-2.3987,3.2731,-1.2262;-1.6006,2.9754,-2.3281;-.231,3.1892,-2.2395;-.0596,4.4014,.9384;-2.523,4.031,.7854;-3.8334,2.9823,-1.2874;-2.0539,2.5672,-3.2322;.4087,2.9314,-3.0851;2.1728,-5.9207,2.2832;1.7675,-6.4025,.2308;-4.3087,2.6856,-2.3623;-4.4678,3.0367,-.2504;6.6346,.1677,-2.0116;5.9574,1.4139,-1.8723;7.8181,.0993,-2.7976;8.2976,1.2089,-3.4483;8.3344,-.8617,-2.8849;9.2054,1.1441,-4.0544;6.4626,2.5371,-2.5856;7.6008,2.4373,-3.3493;5.9305,3.4888,-2.5289;7.9676,3.3138,-3.8909;4.5745,3.9052,-.2436;3.7526,5.055,-.0565;5.9208,3.9613,.2149;6.432,5.1077,.7744;6.5526,3.0756,.1247;7.4694,5.1249,1.1203;4.3143,6.2314,.5127;5.6266,6.2637,.914;3.6742,7.1103,.6369;6.0471,7.172,1.3545;-2.3619,-3.9201,-2.868;-2.5453,-4.956,-2.5439;-3.2362,-3.5926,-3.4617;-1.4897,-3.9149,-3.5408;-1.6965,-1.5883,-2.0862;-2.4337,-1.1111,-2.7574;-1.5281,-.9283,-1.2209;-.7492,-1.6332,-2.6469;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925814311</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000953750370 0.000128965231 0.016526858495 0.005316458736</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097050 -0.000029414 0.000048516 0.000161251 0.000298217 0.000374254 0.000407476 0.000513433 0.000651631 0.000831013 0.000964506 0.001013094 0.001179982 0.001278168 0.001417788 0.001475345 0.001655283 0.001805389 0.002007792 0.002318851 0.002541701 0.002767313 0.002914161 0.003316668 0.003563971 0.003684310 0.004110809 0.004591235 0.004845863 0.005048428 0.005147322 0.005323599 0.006098004 0.006439936 0.006551062 0.006922037 0.007149370 0.007524700 0.008181851 0.008717496 0.008868664 0.009553407 0.009877541 0.009983068 0.010991924 0.011191157 0.011900830 0.012573940 0.013380296 0.013800400 0.014061514 0.014627130 0.014966997 0.015462862 0.015890924 0.016617268 0.016893978 0.018594356 0.018976900 0.019434099 0.020292257 0.020445508 0.021575170 0.021862126 0.022492206 0.022788577 0.023496906 0.023825748 0.024519667 0.025899065 0.026643899 0.026902895 0.027212294 0.027542065 0.028319562 0.029073903 0.030929637 0.031540655 0.032094799 0.034105258 0.034668195 0.036035885 0.039050209 0.039531445 0.041984115 0.045409816 0.046136672 0.046805903 0.048885343 0.049696046 0.049912254 0.050833719 0.051538115 0.052189480 0.052288667 0.052412723 0.052970603 0.053619339 0.054923363 0.056108146 0.056433415 0.056727117 0.057016791 0.057258408 0.057757917 0.058599251 0.059245912 0.059722211 0.061366641 0.062113254 0.062914392 0.064235024 0.064568577 0.065064034 0.066017280 0.067510172 0.067947439 0.068991359 0.070529825 0.072135798 0.072614327 0.072939741 0.073058137 0.074907752 0.078747971 0.080873036 0.081719385 0.083352291 0.084546201 0.087773775 0.088975713 0.089418366 0.089850033 0.091320507 0.093335421 0.094579893 0.095495672 0.096237444 0.096859083 0.098508059 0.100148594 0.100701043 0.102747309 0.103891714 0.104319978 0.106583234 0.109165619 0.110983600 0.112287790 0.112847260 0.113822409 0.114770645 0.116971162 0.117202785 0.118635870 0.119266014 0.120589802 0.122315116 0.125153730 0.125853487 0.128543087 0.129013842 0.131008659 0.133732348 0.136455456 0.137729223 0.138622914 0.139643721 0.140554283 0.143515404 0.144667034 0.145932333 0.146807884 0.151994545 0.153632803 0.154250662 0.160811847 0.161213668 0.168558346 0.171464934 0.176050143 0.179110905 0.181626317 0.184483409 0.189111136 0.190077117 0.191857121 0.201312787 0.202227593 0.206291000 0.206967246 0.207266798 0.212368387 0.212580717 0.215627140 0.217039644 0.220441193 0.220978593 0.224614007 0.225091426 0.226928601 0.231870963 0.234586463 0.235830909 0.238566571 0.246422307 0.249121610 0.252171499 0.256563416 0.257225309 0.258283941 0.262582201 0.271579662 0.282923620 0.292023966 0.300038067 0.300173353 0.301061833 0.307137517 0.307787478 0.309854249 0.320054187 0.321362417 0.326460402 0.330582325 0.336652311 0.347761639 0.352025089 0.355652841 0.360882184 0.362039958 0.364148543 0.384573063 0.407203850 0.414477885 0.430278773 0.432186466 0.435286551 0.450933655 0.464689700 0.475649764 0.478837754 0.480424590 0.486667329 0.498900877 0.503948524 0.515228103 0.518068874 0.543815126 0.566938882 0.567715432 0.586607254 0.592200077 0.605857868 0.644276896 0.645510915 0.668035125 0.675683237 0.687374667 0.704002460 0.704363367 0.705668425 0.709799008 0.717252807 0.734148883 0.738028781 0.739769131 0.747619813 0.750818041 0.771615796 0.775987021 0.809018102 0.821846716 0.824095504 0.828941432 0.834301331 0.847751994 0.849509251 0.851405419 0.854599750 0.863390728 0.867473488 0.875915983 0.887505108 0.891128574 0.892468936 0.893602000 0.902131288 0.910294886 0.918073116 0.923608457 0.924612412 0.932016572 0.935774722 0.956107002 0.962978090 0.965240013 0.970114530 0.978236104 0.982604870 0.998649643 1.013010786 1.016230147 1.021911223 1.040207528 1.055117564 1.071222627 1.072709193 1.079484281 1.087384186 1.108517760 1.110428494 1.118009685 1.119106983 1.122630251 1.123950432 1.141890561 1.149145738 1.161762516 1.170191633 1.177291371 1.187925175 1.200763891 1.222050313 1.234137888 1.258196943 1.296485538 1.298317943 1.314742514 1.326481467 1.327532716 1.330251261 1.331408932 1.334796272 1.342439865 1.349128073 1.368033862 1.380009697 1.381336996 1.381853343 1.429585873 1.517260141 1.557998178 1.684804343 1.923023459</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">253</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92167857" y3="-0.95511828" z3="-0.68033856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60688935" y3="-1.95010354" z3="-1.54423233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0892516" y3="-0.99580409" z3="-1.40667345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77871646" y3="1.47726799" z3="-1.0613392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28997301" y3="0.31035509" z3="-0.49928328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65877656" y3="2.73589179" z3="-1.15752962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00711289" y3="2.73477875" z3="-0.8466548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37747651" y3="4.99327004" z3="-0.38481185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80978661" y3="3.8503726" z3="-0.89681486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7501333" y3="5.86906929" z3="-0.19138479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09610882" y3="1.60919155" z3="-1.68316073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12821574" y3="0.35637333" z3="0.21599652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71624959" y3="0.38212746" z3="-0.64461596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6097999" y3="0.73266697" z3="0.28068126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66811171" y3="-0.85879621" z3="-1.5080512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09335944" y3="-2.47275747" z3="-1.32526686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00470802" y3="-5.49087456" z3="-6.27994647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7410495" y3="-5.05579739" z3="-5.31170608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04900254" y3="-3.9136978" z3="-2.85337194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70925529" y3="-3.67523187" z3="-5.16494532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45578969" y3="-5.88181916" z3="-4.22168258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12419993" y3="-5.30467985" z3="-3.00227204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37235527" y3="-3.07250716" z3="-3.94248586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93895423" y3="-3.00844867" z3="-5.99969991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50513917" y3="-6.96958327" z3="-4.31510367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93922138" y3="-5.93725694" z3="-2.12993389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64947833" y3="-3.36485338" z3="-1.60798104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34953572" y3="-3.84637923" z3="-0.85992388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69429934" y3="-4.84856314" z3="-1.1279963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38024213" y3="-3.54529123" z3="0.58905519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40398587" y3="-3.07299922" z3="3.34833056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68465307" y3="-4.5809435" z3="1.48103255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10732588" y3="-2.26876092" z3="1.09008978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11607488" y3="-2.0349792" z3="2.4609408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68782159" y3="-4.34706656" z3="2.85501226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87731782" y3="-5.58840237" z3="1.10077837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09889709" y3="-1.42785796" z3="0.42685892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11177166" y3="-1.02767219" z3="2.8201205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89116889" y3="-5.17214304" z3="3.54270494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39974916" y3="-2.89312253" z3="4.42737847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32610583" y3="-1.73661226" z3="-3.91263068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46456951" y3="-1.33169075" z3="-3.01069586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34028266" y3="3.70782619" z3="-1.05997681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1356312" y3="-2.97780648" z3="-1.7066057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92042594" y3="-3.1568988" z3="-0.56324198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10918981" y3="-2.28438908" z3="0.37187475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83751667" y3="-0.7202308" z3="0.63332769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72428545" y3="-0.26096073" z3="-0.94224461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52690511" y3="0.46297731" z3="1.20041793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05614185" y3="-1.06094809" z3="2.01194297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40541884" y3="-4.36784567" z3="-0.33028644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12029249" y3="-4.60922718" z3="0.87216553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03677074" y3="0.02097542" z3="-1.75499394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37552549" y3="0.6118213" z3="-0.7537288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36184703" y3="-1.08947775" z3="-1.30019768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64765214" y3="0.56922105" z3="0.53919843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14791807" y3="0.16132369" z3="2.19243612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99901837" y3="1.45739852" z3="1.30548496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51557498" y3="-0.1144315" z3="2.35000759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87162826" y3="-1.73266189" z3="1.69085232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54899219" y3="-1.51867041" z3="2.87983586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05627019" y3="-4.02713071" z3="0.89131725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50743775" y3="-4.35642562" z3="1.75122481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35130182" y3="-5.68283945" z3="0.86482233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28182618" y3="-2.1974852" z3="-0.17417474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13648317" y3="-3.29269164" z3="-1.03794285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49157631" y3="-4.4518614" z3="-0.62350695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9974429" y3="-4.51090104" z3="0.67410602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14825366" y3="-3.45461265" z3="1.56767557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78356504" y3="-2.29767384" z3="1.13450795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49180542" y3="-3.21900133" z3="-2.06902574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34790016" y3="-5.29058769" z3="-1.30533334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26017606" y3="-5.70010945" z3="1.10298101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74323549" y3="-3.53810395" z3="2.5772424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87896857" y3="-1.4514593" z3="1.81643626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49398907" y3="4.02181333" z3="0.02145978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86419593" y3="3.80679422" z3="-0.0451959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39765553" y3="3.27578497" z3="-1.21446213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60270217" y3="2.9850533" z3="-2.32036664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23308684" y3="3.19942271" z3="-2.23459249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05253541" y3="4.39350044" z3="0.94935533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51613786" y3="4.0222082" z3="0.80188978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83229008" y3="2.98451023" z3="-1.27321388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05849625" y3="2.58180738" z3="-3.22540062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40396485" y3="2.94752718" z3="-3.08394567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16810794" y3="-5.9144905" z3="2.29068267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7650448" y3="-6.40021675" z3="0.23866244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31007182" y3="2.69161328" z3="-2.34804113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46436562" y3="3.03483772" z3="-0.23465305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63138538" y3="0.1653697" z3="-2.01576638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95519679" y3="1.41221406" z3="-1.87729921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81372955" y3="0.09506571" z3="-2.80324339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29297824" y3="1.20339277" z3="-3.45628436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32928679" y3="-0.86636485" z3="-2.88976891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19993642" y3="1.13705618" z3="-4.06361505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4600732" y3="2.53393106" z3="-2.59304508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59701125" y3="2.43231518" z3="-3.35828684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92855642" y3="3.4860692" z3="-2.53711156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96360112" y3="3.30770069" z3="-3.90182904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57766189" y3="3.90621736" z3="-0.24793837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75722053" y3="5.05680735" z3="-0.05906996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92516979" y3="3.96127905" z3="0.2073465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43889601" y3="5.10750423" z3="0.76484143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55595633" y3="3.07494755" z3="0.11619709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47713022" y3="5.12377158" z3="1.10824306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3215403" y3="6.23292517" z3="0.50790131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63503408" y3="6.26424734" z3="0.90557234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6825818" y3="7.11253627" z3="0.63327169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05755733" y3="7.17246955" z3="1.3442955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3569439" y3="-3.92167289" z3="-2.87195171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53838022" y3="-4.95830052" z3="-2.54929033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23099962" y3="-3.59563405" z3="-3.46688546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48365576" y3="-3.9138546" z3="-3.54332231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69722936" y3="-1.58933542" z3="-2.08694059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43441889" y3="-1.11243652" z3="-2.75819112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53060056" y3="-0.93003532" z3="-1.22074682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74893722" y3="-1.63234801" z3="-2.64634552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9217,-.9551,-.6803;6.6069,-1.9501,-1.5442;6.0893,-.9958,-1.4067;4.7787,1.4773,-1.0613;4.29,.3104,-.4993;2.6588,2.7359,-1.1575;4.0071,2.7348,-.8467;2.3775,4.9933,-.3848;1.8098,3.8504,-.8968;1.7501,5.8691,-.1914;2.0961,1.6092,-1.6832;3.1282,.3564,.216;1.7162,.3821,-.6446;.6098,.7327,.2807;1.6681,-.8588,-1.5081;1.0934,-2.4728,-1.3253;2.0047,-5.4909,-6.2799;1.741,-5.0558,-5.3117;1.049,-3.9137,-2.8534;1.7093,-3.6752,-5.1649;1.4558,-5.8818,-4.2217;1.1242,-5.3047,-3.0023;1.3724,-3.0725,-3.9425;1.939,-3.0084,-5.9997;1.5051,-6.9696,-4.3151;.9392,-5.9373,-2.1299;.6495,-3.3649,-1.608;-.3495,-3.8464,-.8599;-.6943,-4.8486,-1.128;-.3802,-3.5453,.5891;-.404,-3.073,3.3483;-.6847,-4.5809,1.481;-.1073,-2.2688,1.0901;-.1161,-2.035,2.4609;-.6878,-4.3471,2.855;-.8773,-5.5884,1.1008;.0989,-1.4279,.4269;.1118,-1.0277,2.8201;-.8912,-5.1721,3.5427;-.3997,-2.8931,4.4274;1.3261,-1.7366,-3.9126;1.4646,-1.3317,-3.0107;.3403,3.7078,-1.06;-2.1356,-2.9778,-1.7066;-2.9204,-3.1569,-.5632;-3.1092,-2.2844,.3719;-3.8375,-.7202,.6333;-4.7243,-.261,-.9422;-2.5269,.463,1.2004;-5.0561,-1.0609,2.0119;-3.4054,-4.3678,-.3303;-4.1203,-4.6092,.8722;-4.0368,.021,-1.755;-5.3755,.6118,-.7537;-5.3618,-1.0895,-1.3002;-1.6477,.5692,.5392;-2.1479,.1613,2.1924;-2.999,1.4574,1.3055;-5.5156,-.1144,2.35;-5.8716,-1.7327,1.6909;-4.549,-1.5187,2.8798;-5.0563,-4.0271,.8913;-3.5074,-4.3564,1.7512;-4.3513,-5.6828,.8648;4.2818,-2.1975,-.1742;4.1365,-3.2927,-1.0379;3.4916,-4.4519,-.6235;2.9974,-4.5109,.6741;3.1483,-3.4546,1.5677;3.7836,-2.2977,1.1345;4.4918,-3.219,-2.069;3.3479,-5.2906,-1.3053;2.2602,-5.7001,1.103;2.7432,-3.5381,2.5772;3.879,-1.4515,1.8164;-.494,4.0218,.0215;-1.8642,3.8068,-.0452;-2.3977,3.2758,-1.2145;-1.6027,2.9851,-2.3204;-.2331,3.1994,-2.2346;-.0525,4.3935,.9494;-2.5161,4.0222,.8019;-3.8323,2.9845,-1.2732;-2.0585,2.5818,-3.2254;.404,2.9475,-3.0839;2.1681,-5.9145,2.2907;1.765,-6.4002,.2387;-4.3101,2.6916,-2.348;-4.4644,3.0348,-.2347;6.6314,.1654,-2.0158;5.9552,1.4122,-1.8773;7.8137,.0951,-2.8032;8.293,1.2034,-3.4563;8.3293,-.8664,-2.8898;9.1999,1.1371,-4.0636;6.4601,2.5339,-2.593;7.597,2.4323,-3.3583;5.9286,3.4861,-2.5371;7.9636,3.3077,-3.9018;4.5777,3.9062,-.2479;3.7572,5.0568,-.0591;5.9252,3.9613,.2073;6.4389,5.1075,.7648;6.556,3.0749,.1162;7.4771,5.1238,1.1082;4.3215,6.2329,.5079;5.635,6.2642,.9056;3.6826,7.1125,.6333;6.0576,7.1725,1.3443;-2.3569,-3.9217,-2.872;-2.5384,-4.9583,-2.5493;-3.231,-3.5956,-3.4669;-1.4837,-3.9139,-3.5433;-1.6972,-1.5893,-2.0869;-2.4344,-1.1124,-2.7582;-1.5306,-.93,-1.2207;-.7489,-1.6323,-2.6463;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930181383</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000217927729 0.000032492707 0.023278298355 0.005356213269</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002064904733 0.001376603155</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057097290 -0.000016529 0.000033798 0.000106146 0.000285597 0.000351754 0.000408088 0.000514076 0.000651161 0.000830231 0.000967744 0.001012436 0.001181541 0.001279431 0.001418859 0.001483477 0.001655369 0.001805748 0.002006183 0.002317619 0.002545206 0.002768075 0.002914503 0.003296399 0.003563393 0.003682169 0.004106669 0.004591358 0.004846364 0.005046117 0.005156282 0.005324341 0.006098292 0.006441295 0.006548678 0.006921194 0.007149158 0.007524470 0.008183893 0.008719215 0.008868219 0.009553437 0.009878077 0.009977587 0.010993566 0.011190427 0.011902430 0.012574768 0.013381477 0.013800574 0.014065583 0.014628695 0.014964181 0.015462225 0.015891820 0.016617337 0.016891400 0.018594239 0.018977917 0.019434573 0.020288552 0.020442496 0.021575215 0.021862312 0.022492684 0.022788776 0.023496957 0.023825120 0.024519554 0.025899151 0.026644852 0.026904120 0.027213447 0.027542440 0.028321636 0.029073861 0.030929858 0.031540777 0.032093091 0.034105065 0.034668854 0.036036499 0.039051034 0.039533270 0.041984236 0.045411319 0.046139528 0.046801717 0.048886318 0.049696054 0.049912024 0.050834040 0.051538255 0.052189485 0.052288678 0.052412900 0.052974313 0.053620636 0.054923188 0.056108018 0.056434327 0.056727004 0.057016746 0.057258373 0.057758706 0.058600565 0.059246212 0.059722988 0.061366805 0.062114172 0.062914822 0.064235792 0.064569233 0.065065920 0.066019242 0.067510584 0.067947247 0.068991671 0.070530805 0.072136978 0.072614221 0.072942146 0.073050886 0.074901292 0.078747474 0.080873550 0.081720946 0.083352360 0.084545301 0.087773357 0.088975540 0.089419755 0.089850136 0.091320192 0.093335885 0.094580579 0.095495800 0.096238550 0.096859079 0.098510303 0.100150272 0.100702058 0.102750030 0.103897219 0.104323032 0.106584004 0.109170315 0.110987949 0.112288031 0.112848266 0.113823447 0.114771707 0.116973026 0.117202832 0.118639092 0.119265070 0.120590342 0.122315603 0.125154051 0.125853985 0.128543450 0.129013855 0.131010323 0.133736808 0.136455589 0.137729257 0.138622783 0.139645539 0.140554205 0.143515389 0.144666483 0.145932831 0.146808190 0.151995997 0.153631400 0.154249740 0.160811614 0.161207532 0.168559369 0.171465069 0.176053180 0.179111341 0.181628733 0.184485107 0.189111089 0.190087737 0.191857260 0.201312991 0.202227390 0.206291038 0.206967420 0.207266777 0.212369517 0.212580887 0.215628064 0.217040033 0.220440752 0.220977679 0.224616539 0.225091724 0.226929442 0.231871795 0.234588203 0.235849990 0.238567438 0.246421399 0.249118341 0.252194864 0.256564326 0.257225380 0.258283911 0.262583291 0.271579725 0.282924481 0.292023990 0.300039243 0.300173474 0.301062221 0.307137656 0.307787513 0.309854612 0.320057258 0.321362559 0.326460966 0.330602208 0.336652574 0.347763886 0.352025769 0.355653096 0.360882083 0.362046674 0.364149530 0.384573026 0.407206376 0.414481549 0.430279983 0.432189681 0.435286163 0.450935415 0.464690603 0.475650923 0.478838060 0.480425668 0.486668791 0.498900908 0.503950325 0.515228538 0.518069681 0.543817675 0.566939905 0.567716108 0.586607611 0.592200664 0.605866649 0.644281362 0.645515463 0.668035614 0.675683426 0.687374775 0.704005155 0.704363775 0.705662407 0.709800227 0.717255341 0.734157576 0.738029519 0.739767728 0.747621545 0.750821296 0.771615846 0.775987143 0.809019625 0.821847512 0.824097093 0.828942142 0.834301824 0.847774947 0.849515192 0.851406098 0.854600537 0.863394831 0.867473553 0.875918298 0.887506175 0.891129395 0.892468862 0.893607030 0.902131399 0.910297921 0.918073005 0.923605744 0.924612395 0.932016928 0.935775781 0.956107436 0.962978484 0.965240778 0.970114785 0.978235339 0.982604812 0.998649890 1.013012525 1.016232565 1.021911428 1.040207716 1.055118853 1.071222777 1.072709738 1.079484378 1.087384292 1.108517968 1.110428526 1.118013828 1.119107477 1.122630523 1.123952625 1.141890621 1.149161390 1.161762518 1.170192258 1.177291999 1.187957236 1.200764102 1.222054497 1.234139921 1.258197867 1.296485832 1.298318175 1.314742628 1.326481346 1.327532288 1.330253715 1.331409608 1.334797055 1.342442750 1.349155494 1.368090433 1.380009950 1.381337485 1.381857283 1.429586314 1.517261623 1.557998224 1.684804727 1.923023997</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">254</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92255989" y3="-0.9550469" z3="-0.68440293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60582048" y3="-1.9490381" z3="-1.55329812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08806739" y3="-0.99504472" z3="-1.41410329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77758183" y3="1.47739953" z3="-1.06445921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29073915" y3="0.31013127" z3="-0.50158394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65694375" y3="2.73539454" z3="-1.15411928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00608361" y3="2.73445559" z3="-0.84662302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37635806" y3="4.99136631" z3="-0.37648966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8079912" y3="3.84915897" z3="-0.88931847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74917003" y3="5.86652252" z3="-0.18067943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09354284" y3="1.60898171" z3="-1.67987503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1306016" y3="0.35562009" z3="0.21635641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71675794" y3="0.38093374" z3="-0.64119567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61218207" y3="0.7304299" z3="0.28677069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66725756" y3="-0.85968124" z3="-1.50502335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09481223" y3="-2.47532198" z3="-1.32237918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01154165" y3="-5.49671817" z3="-6.27439025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74684002" y3="-5.06098616" z3="-5.30670744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05204322" y3="-3.91711769" z3="-2.84989389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71678427" y3="-3.68027068" z3="-5.1603443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45844008" y3="-5.88635492" z3="-4.21697171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12558166" y3="-5.30834374" z3="-2.9983078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37857556" y3="-3.07665569" z3="-3.93862782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94893176" y3="-3.01398893" z3="-5.9948438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50636496" y3="-6.97428828" z3="-4.30998216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93830105" y3="-5.94048781" z3="-2.12614811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65120745" y3="-3.36728714" z3="-1.60536714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34846341" y3="-3.84855556" z3="-0.85788469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69336258" y3="-4.85060353" z3="-1.12611251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38070585" y3="-3.54716109" z3="0.59081411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40754747" y3="-3.07404376" z3="3.3498195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68754624" y3="-4.58220657" z3="1.48275533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10715901" y3="-2.27064009" z3="1.09168034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1174481" y3="-2.03636075" z3="2.46234801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69272548" y3="-4.34756176" z3="2.85648409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8806066" y3="-5.58982799" z3="1.10274876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10062375" y3="-1.43007539" z3="0.42835699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11118127" y3="-1.02921748" z3="2.82132171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89800611" y3="-5.17223587" z3="3.54442043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40486365" y3="-2.89370527" z3="4.42870892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33444868" y3="-1.74068153" z3="-3.90944166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46954827" y3="-1.33501594" z3="-3.0072318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33834087" y3="3.7072689" z3="-1.05093729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13363841" y3="-2.97979696" z3="-1.70713333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91956249" y3="-3.15683734" z3="-0.5642221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10885527" y3="-2.28266564" z3="0.36925395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8367309" y3="-0.71718914" z3="0.62563315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71284484" y3="-0.2563681" z3="-0.95577414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52675048" y3="0.46267884" z3="1.20062611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06576523" y3="-1.05495494" z3="1.99576851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40510276" y3="-4.36751234" z3="-0.32944432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12142263" y3="-4.6066892" z3="0.87274975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02002826" y3="0.03399527" z3="-1.76108227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37201997" y3="0.61089311" z3="-0.76932475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34154015" y3="-1.08750926" z3="-1.32347598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64526854" y3="0.56920926" z3="0.54235644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1515099" y3="0.15783637" z3="2.19315455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99760071" y3="1.45757345" z3="1.30671197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52652444" y3="-0.10730737" z3="2.32882083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87971596" y3="-1.72593062" z3="1.66930694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56605674" y3="-1.51212348" z3="2.86831629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05741424" y3="-4.02468313" z3="0.88987496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50935749" y3="-4.3522076" z3="1.75182173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35260178" y3="-5.68008698" z3="0.86721257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28431214" y3="-2.19736827" z3="-0.17611099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13755601" y3="-3.29337604" z3="-1.03846932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49265774" y3="-4.45181372" z3="-0.62195437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99969678" y3="-4.50919946" z3="0.67618516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15238742" y3="-3.4522295" z3="1.56853701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78797553" y3="-2.29620947" z3="1.13343651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49143847" y3="-3.22086481" z3="-2.07013452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34770866" y3="-5.29103165" z3="-1.30273661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26150002" y3="-5.69723114" z3="1.10699884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74853578" y3="-3.534438" z3="2.57867291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88475462" y3="-1.44944862" z3="1.81442533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49492406" y3="4.02123392" z3="0.0310663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86547291" y3="3.80848939" z3="-0.03545806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40040014" y3="3.28006719" z3="-1.20527864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60642404" y3="2.9892934" z3="-2.31184712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23641054" y3="3.20105511" z3="-2.22607716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05258577" y3="4.39127178" z3="0.95919483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51657248" y3="4.023667" z3="0.81249045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83562404" y3="2.99183941" z3="-1.26410976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06322719" y3="2.58802262" z3="-3.21730883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3999422" y3="2.94892536" z3="-3.07585811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16924638" y3="-5.90959946" z3="2.29506284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76582697" y3="-6.39837581" z3="0.24379135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31521348" y3="2.70584836" z3="-2.33997372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46629863" y3="3.03738379" z3="-0.22449404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62791523" y3="0.16652093" z3="-2.02457268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95180101" y3="1.41311993" z3="-1.88364263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80784403" y3="0.09696627" z3="-2.81572611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28474455" y3="1.20573223" z3="-3.46977666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32342248" y3="-0.8642351" z3="-2.9043056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18978665" y3="1.13992291" z3="-4.08001007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45423889" y3="2.5353612" z3="-2.60026522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58884203" y3="2.43442552" z3="-3.36905058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92259147" y3="3.48726052" z3="-2.54226741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95357706" y3="3.31014014" z3="-3.91331511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57757183" y3="3.90511119" z3="-0.24725442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75696561" y3="5.05492361" z3="-0.05404452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92621733" y3="3.95994378" z3="0.2048015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44079402" y3="5.10531414" z3="0.76323273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5571458" y3="3.07410892" z3="0.1107294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4798206" y3="5.12141979" z3="1.10425521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32221861" y3="6.23018439" z3="0.51365981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63681203" y3="6.26133468" z3="0.90801533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68315102" y3="7.1092055" z3="0.64230606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06005428" y3="7.16885817" z3="1.34738575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35443531" y3="-3.92502221" z3="-2.87135255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53842159" y3="-4.96074953" z3="-2.54738159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22683661" y3="-3.59829632" z3="-3.46845584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47991523" y3="-3.92000488" z3="-3.54113691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69383893" y3="-1.59220019" z3="-2.08890225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43018202" y3="-1.11574678" z3="-2.76113121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5271115" y3="-0.93172773" z3="-1.22347746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74497395" y3="-1.6365785" z3="-2.64739973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9226,-.955,-.6844;6.6058,-1.949,-1.5533;6.0881,-.995,-1.4141;4.7776,1.4774,-1.0645;4.2907,.3101,-.5016;2.6569,2.7354,-1.1541;4.0061,2.7345,-.8466;2.3764,4.9914,-.3765;1.808,3.8492,-.8893;1.7492,5.8665,-.1807;2.0935,1.609,-1.6799;3.1306,.3556,.2164;1.7168,.3809,-.6412;.6122,.7304,.2868;1.6673,-.8597,-1.505;1.0948,-2.4753,-1.3224;2.0115,-5.4967,-6.2744;1.7468,-5.061,-5.3067;1.052,-3.9171,-2.8499;1.7168,-3.6803,-5.1603;1.4584,-5.8864,-4.217;1.1256,-5.3083,-2.9983;1.3786,-3.0767,-3.9386;1.9489,-3.014,-5.9948;1.5064,-6.9743,-4.31;.9383,-5.9405,-2.1261;.6512,-3.3673,-1.6054;-.3485,-3.8486,-.8579;-.6934,-4.8506,-1.1261;-.3807,-3.5472,.5908;-.4075,-3.074,3.3498;-.6875,-4.5822,1.4828;-.1072,-2.2706,1.0917;-.1174,-2.0364,2.4623;-.6927,-4.3476,2.8565;-.8806,-5.5898,1.1027;.1006,-1.4301,.4284;.1112,-1.0292,2.8213;-.898,-5.1722,3.5444;-.4049,-2.8937,4.4287;1.3344,-1.7407,-3.9094;1.4695,-1.335,-3.0072;.3383,3.7073,-1.0509;-2.1336,-2.9798,-1.7071;-2.9196,-3.1568,-.5642;-3.1089,-2.2827,.3693;-3.8367,-.7172,.6256;-4.7128,-.2564,-.9558;-2.5268,.4627,1.2006;-5.0658,-1.055,1.9958;-3.4051,-4.3675,-.3294;-4.1214,-4.6067,.8727;-4.02,.034,-1.7611;-5.372,.6109,-.7693;-5.3415,-1.0875,-1.3235;-1.6453,.5692,.5424;-2.1515,.1578,2.1932;-2.9976,1.4576,1.3067;-5.5265,-.1073,2.3288;-5.8797,-1.7259,1.6693;-4.5661,-1.5121,2.8683;-5.0574,-4.0247,.8899;-3.5094,-4.3522,1.7518;-4.3526,-5.6801,.8672;4.2843,-2.1974,-.1761;4.1376,-3.2934,-1.0385;3.4927,-4.4518,-.622;2.9997,-4.5092,.6762;3.1524,-3.4522,1.5685;3.788,-2.2962,1.1334;4.4914,-3.2209,-2.0701;3.3477,-5.291,-1.3027;2.2615,-5.6972,1.107;2.7485,-3.5344,2.5787;3.8848,-1.4494,1.8144;-.4949,4.0212,.0311;-1.8655,3.8085,-.0355;-2.4004,3.2801,-1.2053;-1.6064,2.9893,-2.3118;-.2364,3.2011,-2.2261;-.0526,4.3913,.9592;-2.5166,4.0237,.8125;-3.8356,2.9918,-1.2641;-2.0632,2.588,-3.2173;.3999,2.9489,-3.0759;2.1692,-5.9096,2.2951;1.7658,-6.3984,.2438;-4.3152,2.7058,-2.34;-4.4663,3.0374,-.2245;6.6279,.1665,-2.0246;5.9518,1.4131,-1.8836;7.8078,.097,-2.8157;8.2847,1.2057,-3.4698;8.3234,-.8642,-2.9043;9.1898,1.1399,-4.08;6.4542,2.5354,-2.6003;7.5888,2.4344,-3.3691;5.9226,3.4873,-2.5423;7.9536,3.3101,-3.9133;4.5776,3.9051,-.2473;3.757,5.0549,-.054;5.9262,3.9599,.2048;6.4408,5.1053,.7632;6.5571,3.0741,.1107;7.4798,5.1214,1.1043;4.3222,6.2302,.5137;5.6368,6.2613,.908;3.6832,7.1092,.6423;6.0601,7.1689,1.3474;-2.3544,-3.925,-2.8714;-2.5384,-4.9607,-2.5474;-3.2268,-3.5983,-3.4685;-1.4799,-3.92,-3.5411;-1.6938,-1.5922,-2.0889;-2.4302,-1.1157,-2.7611;-1.5271,-.9317,-1.2235;-.745,-1.6366,-2.6474;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929758300</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000440827452 0.000076553149 0.019945315568 0.005233844903</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057095084 0.000003074 0.000040197 0.000097901 0.000304399 0.000346498 0.000408022 0.000514043 0.000650717 0.000826933 0.000967248 0.001014899 0.001179806 0.001279853 0.001419059 0.001488406 0.001654951 0.001804665 0.002004585 0.002314197 0.002542455 0.002762175 0.002913687 0.003267199 0.003563256 0.003679565 0.004089651 0.004591108 0.004844815 0.005036151 0.005152568 0.005324008 0.006097005 0.006440778 0.006549890 0.006918619 0.007147356 0.007522552 0.008182526 0.008719383 0.008867786 0.009553291 0.009876627 0.009973249 0.010993864 0.011189346 0.011902052 0.012575148 0.013381562 0.013798544 0.014067895 0.014627551 0.014961748 0.015461681 0.015891629 0.016615817 0.016867675 0.018592058 0.018978790 0.019434170 0.020285324 0.020439925 0.021573422 0.021863493 0.022492260 0.022788048 0.023496554 0.023823530 0.024519298 0.025898795 0.026643944 0.026905160 0.027214572 0.027542109 0.028324018 0.029073996 0.030930411 0.031541022 0.032050661 0.034104017 0.034669135 0.036036486 0.039051007 0.039533642 0.041984511 0.045411776 0.046140437 0.046796630 0.048886681 0.049695956 0.049911486 0.050834080 0.051538298 0.052189472 0.052288723 0.052412998 0.052977141 0.053621059 0.054923231 0.056108145 0.056434699 0.056726912 0.057016947 0.057254286 0.057759396 0.058601422 0.059246381 0.059722744 0.061366840 0.062115170 0.062913860 0.064236665 0.064569695 0.065066882 0.066019413 0.067510904 0.067947405 0.068991932 0.070529925 0.072137195 0.072611390 0.072942740 0.073041461 0.074856972 0.078745184 0.080872409 0.081720459 0.083352346 0.084543802 0.087720206 0.088975047 0.089420338 0.089848930 0.091319810 0.093335417 0.094580917 0.095495966 0.096240046 0.096858831 0.098513222 0.100152744 0.100702477 0.102751325 0.103903174 0.104325343 0.106585508 0.109174635 0.110990628 0.112288079 0.112848701 0.113824485 0.114772026 0.116973791 0.117203138 0.118639845 0.119261466 0.120590551 0.122316334 0.125153819 0.125854235 0.128542811 0.129014109 0.131010836 0.133741064 0.136455434 0.137729015 0.138622605 0.139646310 0.140553847 0.143515523 0.144666360 0.145932644 0.146807971 0.151994536 0.153629358 0.154246686 0.160804177 0.161166379 0.168559239 0.171465065 0.176054224 0.179111274 0.181629482 0.184486292 0.189110097 0.190092128 0.191857505 0.201312890 0.202227505 0.206291083 0.206967534 0.207266771 0.212369581 0.212580876 0.215629112 0.217039414 0.220438320 0.220976258 0.224617252 0.225091621 0.226930805 0.231872078 0.234589252 0.235862635 0.238568202 0.246417267 0.249092972 0.252210725 0.256564368 0.257225289 0.258283586 0.262583854 0.271579693 0.282924660 0.292024061 0.300039510 0.300173549 0.301062638 0.307137871 0.307787516 0.309854343 0.320055851 0.321362568 0.326461175 0.330614855 0.336652850 0.347764875 0.352026021 0.355653183 0.360878758 0.362055069 0.364150297 0.384573093 0.407208204 0.414482450 0.430281327 0.432178755 0.435283976 0.450936501 0.464690819 0.475647995 0.478838443 0.480426008 0.486662792 0.498900930 0.503950842 0.515229481 0.518066803 0.543818931 0.566940283 0.567716689 0.586608399 0.592192584 0.605869320 0.644281566 0.645518778 0.668035670 0.675681960 0.687374424 0.704010715 0.704364051 0.705624055 0.709796178 0.717256603 0.734164252 0.738029732 0.739766709 0.747606448 0.750823583 0.771615825 0.775987189 0.809018786 0.821848105 0.824098355 0.828942539 0.834302246 0.847789896 0.849519669 0.851406132 0.854602264 0.863397875 0.867473592 0.875919453 0.887506426 0.891129720 0.892471036 0.893606922 0.902131188 0.910301575 0.918072549 0.923577500 0.924609928 0.932017350 0.935776513 0.956106003 0.962965513 0.965240812 0.970113133 0.978193640 0.982603799 0.998650010 1.013010886 1.016234430 1.021911485 1.040207743 1.055119953 1.071220869 1.072709942 1.079485077 1.087384580 1.108518072 1.110428509 1.118015805 1.119106465 1.122630705 1.123953390 1.141890330 1.149173878 1.161762505 1.170192323 1.177291749 1.187979510 1.200764354 1.222055059 1.234141630 1.258198689 1.296485822 1.298318204 1.314742616 1.326481519 1.327533097 1.330253693 1.331408948 1.334797146 1.342445586 1.349177076 1.368135815 1.380010070 1.381337245 1.381859778 1.429588586 1.517205556 1.557998143 1.684804859 1.923012391</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">255</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9190572" y3="-0.95569013" z3="-0.68364976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60049122" y3="-1.95082472" z3="-1.55488376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08325733" y3="-0.99657568" z3="-1.41548775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77448423" y3="1.47658785" z3="-1.06521129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28825532" y3="0.30998557" z3="-0.50038283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65447099" y3="2.73590654" z3="-1.15167089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00423534" y3="2.7343026" z3="-0.84700824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37780963" y3="4.99342506" z3="-0.37764623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80738697" y3="3.85090655" z3="-0.8874626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75167197" y3="5.86952816" z3="-0.18135136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08873733" y3="1.60942806" z3="-1.67447988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1297507" y3="0.35684612" z3="0.22011607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71397205" y3="0.38219938" z3="-0.63427076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6113671" y3="0.73204739" z3="0.29579801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66248699" y3="-0.85868593" z3="-1.49756422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09455155" y3="-2.47507375" z3="-1.31864285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03148696" y3="-5.4920129" z3="-6.2688477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76240265" y3="-5.05735381" z3="-5.30193411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05726572" y3="-3.91624019" z3="-2.84681862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73018614" y3="-3.67689089" z3="-5.15459403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47062501" y3="-5.8838453" z3="-4.21401002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13257558" y3="-5.30718425" z3="-2.996209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38666866" y3="-3.07457791" z3="-3.93374609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96484288" y3="-3.00971838" z3="-5.9876259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52013601" y3="-6.97158269" z3="-4.30768268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94304436" y3="-5.94022511" z3="-2.12522189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65305614" y3="-3.36801898" z3="-1.60272083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34761354" y3="-3.85041399" z3="-0.85762126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6913947" y3="-4.85250795" z3="-1.12721064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38223154" y3="-3.55016667" z3="0.59142449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41112274" y3="-3.08019165" z3="3.3509459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68756972" y3="-4.58686509" z3="1.48194814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11094887" y3="-2.27391319" z3="1.0939965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12217908" y3="-2.04133437" z3="2.46506687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69304992" y3="-4.35428309" z3="2.85616684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8788734" y3="-5.59416331" z3="1.10048332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09639408" y3="-1.43260739" z3="0.43165978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10436632" y3="-1.03415658" z3="2.82549581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89713286" y3="-5.18000925" z3="3.54268654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40864227" y3="-2.90132553" z3="4.43019866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34109279" y3="-1.73871818" z3="-3.90385645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47233667" y3="-1.33338186" z3="-3.00098754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33714103" y3="3.71020849" z3="-1.04595843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1324628" y3="-2.98206951" z3="-1.70943414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91977762" y3="-3.15760517" z3="-0.56724687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11049654" y3="-2.28198297" z3="0.36460536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83736122" y3="-0.71617303" z3="0.62043302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70685932" y3="-0.24997762" z3="-0.96281708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52745546" y3="0.45974903" z3="1.2033629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07282805" y3="-1.05444282" z3="1.98462441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4060365" y3="-4.36745408" z3="-0.33183135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12250872" y3="-4.60506354" z3="0.87052172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01153765" y3="0.04607948" z3="-1.76383345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36873295" y3="0.61471056" z3="-0.77393202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33228954" y3="-1.08056443" z3="-1.33724601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64332627" y3="0.56617073" z3="0.54857322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15657424" y3="0.15117919" z3="2.19636256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99673557" y3="1.45525909" z3="1.31063819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53188535" y3="-0.10635611" z3="2.31879129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88765273" y3="-1.72179315" z3="1.65290064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57801327" y3="-1.5158736" z3="2.85765499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05759418" y3="-4.02147741" z3="0.88753061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51005282" y3="-4.35122559" z3="1.74962946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35507958" y3="-5.67839187" z3="0.86541685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28154591" y3="-2.19796005" z3="-0.17427706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13770453" y3="-3.29548051" z3="-1.03543144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49428955" y3="-4.454591" z3="-0.61835583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99948392" y3="-4.51109398" z3="0.67907843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14925319" y3="-3.45267574" z3="1.57032667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78368562" y3="-2.2961234" z3="1.13478072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49283694" y3="-3.22393359" z3="-2.06673512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35204359" y3="-5.29520392" z3="-1.2982279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26248923" y3="-5.6997398" z3="1.11010578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74415922" y3="-3.53426068" z3="2.58001173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8783672" y3="-1.44857578" z3="1.81505956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49331795" y3="4.02155063" z3="0.03916916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86428565" y3="3.81027924" z3="-0.02453422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40236834" y3="3.28640202" z3="-1.19493562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61112928" y3="2.99802411" z3="-2.30414181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24056486" y3="3.20763717" z3="-2.22082664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04826331" y3="4.38842206" z3="0.96732978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51345826" y3="4.02388154" z3="0.82508766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83821242" y3="3.00088238" z3="-1.2518201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0705662" y3="2.60055398" z3="-3.20989389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39348004" y3="2.95787985" z3="-3.07321034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16985347" y3="-5.9116415" z3="2.29819646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76807837" y3="-6.40181836" z3="0.2469717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32077738" y3="2.72195624" z3="-2.32826236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46642803" y3="3.04159504" z3="-0.21045245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62230383" y3="0.1641849" z3="-2.02808236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94687446" y3="1.41113162" z3="-1.88694806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8005275" y3="0.09337888" z3="-2.82169128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27631724" y3="1.20129407" z3="-3.47797277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31559021" y3="-0.86812242" z3="-2.91038698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18001115" y3="1.1345422" z3="-4.09010701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44809947" y3="2.5324776" z3="-2.60583221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58097761" y3="2.43034903" z3="-3.37700277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91691898" y3="3.48468392" z3="-2.54753525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94475746" y3="3.30539693" z3="-3.92298793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57807405" y3="3.90545637" z3="-0.2508714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7589943" y3="5.05630997" z3="-0.05794888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92775705" y3="3.95996152" z3="0.19802972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44454595" y3="5.10591965" z3="0.75328665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55780994" y3="3.0734265" z3="0.10386353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48442995" y3="5.12175909" z3="1.09171254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32638048" y3="6.23210908" z3="0.50668255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64174653" y3="6.26291539" z3="0.89813331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6883234" y3="7.11192134" z3="0.63530593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06666495" y3="7.17090998" z3="1.33507067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35177561" y3="-3.92873742" z3="-2.87288465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53593281" y3="-4.96416724" z3="-2.54780065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22348941" y3="-3.60299484" z3="-3.4714154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47644051" y3="-3.92410117" z3="-3.54166291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69230906" y3="-1.59477847" z3="-2.09199605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42799741" y3="-1.11884608" z3="-2.76563573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52683215" y3="-0.93385744" z3="-1.22673352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74315128" y3="-1.63935268" z3="-2.64957487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9191,-.9557,-.6836;6.6005,-1.9508,-1.5549;6.0833,-.9966,-1.4155;4.7745,1.4766,-1.0652;4.2883,.31,-.5004;2.6545,2.7359,-1.1517;4.0042,2.7343,-.847;2.3778,4.9934,-.3776;1.8074,3.8509,-.8875;1.7517,5.8695,-.1814;2.0887,1.6094,-1.6745;3.1298,.3568,.2201;1.714,.3822,-.6343;.6114,.732,.2958;1.6625,-.8587,-1.4976;1.0946,-2.4751,-1.3186;2.0315,-5.492,-6.2688;1.7624,-5.0574,-5.3019;1.0573,-3.9162,-2.8468;1.7302,-3.6769,-5.1546;1.4706,-5.8838,-4.214;1.1326,-5.3072,-2.9962;1.3867,-3.0746,-3.9337;1.9648,-3.0097,-5.9876;1.5201,-6.9716,-4.3077;.943,-5.9402,-2.1252;.6531,-3.368,-1.6027;-.3476,-3.8504,-.8576;-.6914,-4.8525,-1.1272;-.3822,-3.5502,.5914;-.4111,-3.0802,3.3509;-.6876,-4.5869,1.4819;-.1109,-2.2739,1.094;-.1222,-2.0413,2.4651;-.693,-4.3543,2.8562;-.8789,-5.5942,1.1005;.0964,-1.4326,.4317;.1044,-1.0342,2.8255;-.8971,-5.18,3.5427;-.4086,-2.9013,4.4302;1.3411,-1.7387,-3.9039;1.4723,-1.3334,-3.001;.3371,3.7102,-1.046;-2.1325,-2.9821,-1.7094;-2.9198,-3.1576,-.5672;-3.1105,-2.282,.3646;-3.8374,-.7162,.6204;-4.7069,-.25,-.9628;-2.5275,.4597,1.2034;-5.0728,-1.0544,1.9846;-3.406,-4.3675,-.3318;-4.1225,-4.6051,.8705;-4.0115,.0461,-1.7638;-5.3687,.6147,-.7739;-5.3323,-1.0806,-1.3372;-1.6433,.5662,.5486;-2.1566,.1512,2.1964;-2.9967,1.4553,1.3106;-5.5319,-.1064,2.3188;-5.8877,-1.7218,1.6529;-4.578,-1.5159,2.8577;-5.0576,-4.0215,.8875;-3.5101,-4.3512,1.7496;-4.3551,-5.6784,.8654;4.2815,-2.198,-.1743;4.1377,-3.2955,-1.0354;3.4943,-4.4546,-.6184;2.9995,-4.5111,.6791;3.1493,-3.4527,1.5703;3.7837,-2.2961,1.1348;4.4928,-3.2239,-2.0667;3.352,-5.2952,-1.2982;2.2625,-5.6997,1.1101;2.7442,-3.5343,2.58;3.8784,-1.4486,1.8151;-.4933,4.0216,.0392;-1.8643,3.8103,-.0245;-2.4024,3.2864,-1.1949;-1.6111,2.998,-2.3041;-.2406,3.2076,-2.2208;-.0483,4.3884,.9673;-2.5135,4.0239,.8251;-3.8382,3.0009,-1.2518;-2.0706,2.6006,-3.2099;.3935,2.9579,-3.0732;2.1699,-5.9116,2.2982;1.7681,-6.4018,.247;-4.3208,2.722,-2.3283;-4.4664,3.0416,-.2105;6.6223,.1642,-2.0281;5.9469,1.4111,-1.8869;7.8005,.0934,-2.8217;8.2763,1.2013,-3.478;8.3156,-.8681,-2.9104;9.18,1.1345,-4.0901;6.4481,2.5325,-2.6058;7.581,2.4303,-3.377;5.9169,3.4847,-2.5475;7.9448,3.3054,-3.923;4.5781,3.9055,-.2509;3.759,5.0563,-.0579;5.9278,3.96,.198;6.4445,5.1059,.7533;6.5578,3.0734,.1039;7.4844,5.1218,1.0917;4.3264,6.2321,.5067;5.6417,6.2629,.8981;3.6883,7.1119,.6353;6.0667,7.1709,1.3351;-2.3518,-3.9287,-2.8729;-2.5359,-4.9642,-2.5478;-3.2235,-3.603,-3.4714;-1.4764,-3.9241,-3.5417;-1.6923,-1.5948,-2.092;-2.428,-1.1188,-2.7656;-1.5268,-.9339,-1.2267;-.7432,-1.6394,-2.6496;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930082146</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000531788514 0.000075664595 0.013777265863 0.004403303246</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057093092 -0.000042922 0.000044173 0.000144225 0.000317266 0.000374098 0.000407839 0.000509159 0.000653166 0.000825459 0.000961264 0.001016410 0.001180615 0.001284583 0.001418322 0.001489987 0.001654471 0.001801460 0.002001603 0.002312347 0.002544743 0.002763056 0.002916839 0.003192199 0.003561429 0.003662640 0.004062036 0.004589678 0.004846446 0.005022433 0.005151741 0.005323710 0.006096302 0.006435266 0.006538442 0.006918816 0.007142492 0.007509196 0.008181629 0.008719239 0.008865979 0.009553156 0.009873261 0.009940886 0.010995442 0.011188752 0.011897757 0.012575681 0.013380464 0.013795462 0.014064245 0.014625922 0.014956220 0.015459780 0.015891065 0.016614112 0.016829778 0.018591459 0.018979782 0.019434055 0.020282301 0.020439453 0.021569090 0.021862298 0.022492190 0.022786518 0.023496126 0.023823330 0.024519197 0.025898402 0.026639517 0.026905070 0.027209746 0.027540417 0.028324936 0.029072873 0.030930394 0.031540683 0.031990012 0.034103152 0.034669506 0.036037096 0.039051068 0.039535679 0.041984541 0.045412364 0.046141757 0.046790794 0.048888119 0.049695958 0.049911543 0.050834230 0.051538375 0.052189753 0.052288728 0.052413065 0.052980310 0.053621603 0.054923292 0.056108351 0.056435230 0.056726933 0.057016967 0.057250609 0.057759624 0.058601825 0.059246154 0.059722524 0.061366213 0.062116007 0.062911705 0.064235011 0.064569888 0.065068762 0.066019054 0.067510509 0.067947320 0.068992447 0.070528259 0.072135364 0.072601167 0.072939643 0.073013842 0.074769506 0.078742433 0.080872109 0.081721668 0.083352397 0.084542712 0.087674378 0.088974502 0.089421388 0.089848500 0.091319623 0.093335776 0.094581309 0.095496195 0.096240624 0.096858715 0.098515394 0.100155043 0.100702919 0.102753896 0.103909571 0.104329305 0.106587205 0.109176793 0.110993766 0.112288392 0.112850097 0.113825717 0.114772474 0.116974615 0.117203182 0.118640127 0.119249770 0.120590738 0.122316883 0.125152289 0.125854270 0.128542599 0.129014175 0.131011171 0.133744391 0.136455565 0.137729264 0.138622525 0.139646939 0.140552975 0.143515916 0.144665091 0.145932353 0.146807934 0.151994758 0.153627445 0.154239050 0.160781247 0.161088333 0.168560055 0.171464882 0.176054401 0.179111160 0.181629575 0.184487489 0.189108636 0.190097681 0.191857825 0.201313741 0.202227544 0.206291265 0.206967477 0.207266767 0.212370157 0.212580900 0.215630352 0.217039002 0.220434581 0.220970924 0.224612023 0.225091902 0.226935157 0.231872541 0.234589741 0.235870903 0.238569216 0.246407574 0.249045309 0.252211300 0.256564463 0.257225085 0.258283220 0.262584231 0.271579796 0.282924683 0.292024124 0.300036380 0.300172822 0.301062876 0.307137557 0.307787591 0.309853747 0.320039018 0.321362558 0.326461528 0.330617578 0.336651817 0.347765440 0.352026004 0.355653295 0.360871078 0.362061915 0.364150788 0.384573006 0.407208966 0.414482651 0.430281469 0.432168251 0.435283473 0.450937752 0.464690776 0.475644243 0.478838935 0.480426769 0.486658290 0.498900899 0.503951047 0.515229322 0.518063304 0.543818460 0.566939815 0.567716815 0.586608516 0.592185541 0.605871256 0.644277114 0.645519003 0.668035864 0.675680582 0.687373808 0.704013363 0.704363955 0.705532342 0.709785949 0.717256748 0.734167078 0.738029877 0.739762450 0.747591932 0.750823860 0.771615835 0.775987181 0.809018971 0.821847845 0.824099330 0.828942640 0.834302129 0.847797214 0.849521826 0.851406335 0.854603350 0.863399050 0.867473606 0.875919633 0.887506055 0.891128098 0.892472089 0.893607925 0.902131038 0.910297947 0.918072115 0.923508900 0.924605190 0.932017222 0.935775002 0.956102915 0.962949653 0.965241222 0.970111473 0.978144944 0.982602734 0.998649869 1.013009588 1.016235320 1.021911575 1.040207810 1.055120069 1.071218119 1.072710989 1.079484666 1.087384765 1.108517338 1.110428587 1.118017760 1.119106268 1.122630758 1.123953798 1.141890317 1.149172124 1.161762496 1.170192431 1.177291881 1.187987342 1.200764387 1.222057879 1.234140114 1.258199227 1.296485868 1.298318247 1.314742826 1.326481407 1.327533388 1.330252696 1.331408831 1.334796951 1.342448443 1.349182350 1.368168505 1.380009991 1.381337207 1.381859820 1.429587991 1.517138968 1.557997751 1.684805055 1.922988600</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">256</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91902973" y3="-0.95519613" z3="-0.68456328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59888022" y3="-1.95095178" z3="-1.55809795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08181905" y3="-0.99664242" z3="-1.41860162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77378969" y3="1.47678605" z3="-1.06804199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28859578" y3="0.3106811" z3="-0.50131152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65376981" y3="2.73658632" z3="-1.14989535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0042827" y3="2.73475375" z3="-0.84853012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37883793" y3="4.99382537" z3="-0.37378175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80729534" y3="3.85158992" z3="-0.88282735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75319614" y3="5.86968754" z3="-0.17598281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08667077" y3="1.61028023" z3="-1.67173725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13140624" y3="0.35829766" z3="0.2212044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71424096" y3="0.38285629" z3="-0.63081564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61305223" y3="0.73191386" z3="0.30124664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66180451" y3="-0.85810279" z3="-1.49394361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0955359" y3="-2.47539809" z3="-1.31585737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04291319" y3="-5.4930963" z3="-6.26367856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77162454" y3="-5.058279" z3="-5.29741026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06100356" y3="-3.91667651" z3="-2.84398523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73963974" y3="-3.67776534" z3="-5.1502258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4767248" y3="-5.88459771" z3="-4.21013591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13599048" y3="-5.30771125" z3="-2.99312765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39333596" y3="-3.07522604" z3="-3.93021918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97662385" y3="-3.01072143" z3="-5.98274921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52589031" y3="-6.97238582" z3="-4.30365191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94411705" y3="-5.94067343" z3="-2.12256448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6543804" y3="-3.36787021" z3="-1.600929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34695647" y3="-3.85069048" z3="-0.85676833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69011102" y3="-4.85290854" z3="-1.126628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38389398" y3="-3.55011938" z3="0.59201854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41946016" y3="-3.07884284" z3="3.35126817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69378394" y3="-4.58566556" z3="1.48224791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11156891" y3="-2.27401691" z3="1.0946602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12622216" y3="-2.04065193" z3="2.46547661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70331505" y3="-4.35193142" z3="2.85611908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88590471" y3="-5.59281627" z3="1.10081102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09914449" y3="-1.43336952" z3="0.43248887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10144398" y3="-1.03380618" z3="2.82586977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91091012" y3="-5.17699523" z3="3.54285605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42024656" y3="-2.89921182" z3="4.43029619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34814097" y3="-1.73937503" z3="-3.90059971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47647937" y3="-1.33374817" z3="-2.99741381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3368314" y3="3.71122567" z3="-1.03890356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13049771" y3="-2.98283226" z3="-1.71096752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91980839" y3="-3.15939587" z3="-0.57039713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11206756" y3="-2.28478055" z3="0.36199219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83779588" y3="-0.71817446" z3="0.61744829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7019011" y3="-0.24902397" z3="-0.96820161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52833215" y3="0.4556524" z3="1.20558027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07809066" y3="-1.05698427" z3="1.97715972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40602281" y3="-4.3699229" z3="-0.33656074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12581193" y3="-4.60852411" z3="0.86352868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00391741" y3="0.05387478" z3="-1.7644522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36917178" y3="0.61156561" z3="-0.77951286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32138122" y3="-1.08103" z3="-1.34952844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6431534" y3="0.56337128" z3="0.55241172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15928823" y3="0.14470538" z3="2.19854012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99746979" y3="1.45108366" z3="1.31427783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53840926" y3="-0.10901808" z3="2.30993017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89166156" y3="-1.72415222" z3="1.64196387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58668652" y3="-1.51880436" z3="2.8519276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06144714" y3="-4.02583066" z3="0.87806621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51604207" y3="-4.35451329" z3="1.74428944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35755379" y3="-5.68186787" z3="0.85739431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28218715" y3="-2.19702108" z3="-0.17324944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13841777" y3="-3.29564265" z3="-1.03292793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49444684" y3="-4.4538612" z3="-0.61458355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99878149" y3="-4.50837341" z3="0.68259898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1488882" y3="-3.44903076" z3="1.5726212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78410343" y3="-2.29344478" z3="1.13589503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49367687" y3="-3.22554771" z3="-2.06428327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35199797" y3="-5.29499785" z3="-1.29350103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26018745" y3="-5.69566437" z3="1.11451984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7432301" y3="-3.52902914" z3="2.58220751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87878031" y3="-1.445051" z3="1.81514814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49168476" y3="4.01940538" z3="0.04844161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86280526" y3="3.80872305" z3="-0.01399174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40295704" y3="3.28842975" z3="-1.18501398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61365999" y3="3.00330186" z3="-2.29639177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24303817" y3="3.2126365" z3="-2.21473428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04510949" y3="4.38356262" z3="0.97684387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51033967" y3="4.0196264" z3="0.83775358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83895966" y3="3.00342607" z3="-1.24065112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07464866" y3="2.60867597" z3="-3.20266507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3894205" y3="2.96560426" z3="-3.06887979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16605433" y3="-5.90576164" z3="2.30281858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76605465" y3="-6.39847719" z3="0.25181139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32323909" y3="2.7281987" z3="-2.31723932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46551568" y3="3.04064397" z3="-0.19821002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61949751" y3="0.16350419" z3="-2.03354746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94438714" y3="1.41056283" z3="-1.89221897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79589082" y3="0.09188843" z3="-2.829799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27012682" y3="1.19908082" z3="-3.48839969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31072708" y3="-0.86968255" z3="-2.91870398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17234302" y3="1.13166272" z3="-4.1026554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44397595" y3="2.53115507" z3="-2.61337556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57504338" y3="2.42820521" z3="-3.38711088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91287785" y3="3.48334123" z3="-2.55491838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93755175" y3="3.30261926" z3="-3.93492666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5796108" y3="3.9057391" z3="-0.25349872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76099094" y3="5.05655812" z3="-0.05790815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93046739" y3="3.96005469" z3="0.19194089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44879262" y3="5.10582788" z3="0.74601291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56018473" y3="3.0735109" z3="0.09622816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48951214" y3="5.1215126" z3="1.08182831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33000454" y3="6.23215207" z3="0.50528141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64654215" y3="6.26279687" z3="0.89303118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69234172" y3="7.11192344" z3="0.63573201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07273462" y3="7.17064921" z3="1.32883603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34729533" y3="-3.92862326" z3="-2.87548734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53231399" y3="-4.96415163" z3="-2.55159517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21756808" y3="-3.60228349" z3="-3.47581319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47047071" y3="-3.92396041" z3="-3.54226601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69019607" y3="-1.59518776" z3="-2.09186748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42555818" y3="-1.11866862" z3="-2.76506165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5250296" y3="-0.93503345" z3="-1.22590121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74038501" y3="-1.6392572" z3="-2.64868787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.919,-.9552,-.6846;6.5989,-1.951,-1.5581;6.0818,-.9966,-1.4186;4.7738,1.4768,-1.068;4.2886,.3107,-.5013;2.6538,2.7366,-1.1499;4.0043,2.7348,-.8485;2.3788,4.9938,-.3738;1.8073,3.8516,-.8828;1.7532,5.8697,-.176;2.0867,1.6103,-1.6717;3.1314,.3583,.2212;1.7142,.3829,-.6308;.6131,.7319,.3012;1.6618,-.8581,-1.4939;1.0955,-2.4754,-1.3159;2.0429,-5.4931,-6.2637;1.7716,-5.0583,-5.2974;1.061,-3.9167,-2.844;1.7396,-3.6778,-5.1502;1.4767,-5.8846,-4.2101;1.136,-5.3077,-2.9931;1.3933,-3.0752,-3.9302;1.9766,-3.0107,-5.9827;1.5259,-6.9724,-4.3037;.9441,-5.9407,-2.1226;.6544,-3.3679,-1.6009;-.347,-3.8507,-.8568;-.6901,-4.8529,-1.1266;-.3839,-3.5501,.592;-.4195,-3.0788,3.3513;-.6938,-4.5857,1.4822;-.1116,-2.274,1.0947;-.1262,-2.0407,2.4655;-.7033,-4.3519,2.8561;-.8859,-5.5928,1.1008;.0991,-1.4334,.4325;.1014,-1.0338,2.8259;-.9109,-5.177,3.5429;-.4202,-2.8992,4.4303;1.3481,-1.7394,-3.9006;1.4765,-1.3337,-2.9974;.3368,3.7112,-1.0389;-2.1305,-2.9828,-1.711;-2.9198,-3.1594,-.5704;-3.1121,-2.2848,.362;-3.8378,-.7182,.6174;-4.7019,-.249,-.9682;-2.5283,.4557,1.2056;-5.0781,-1.057,1.9772;-3.406,-4.3699,-.3366;-4.1258,-4.6085,.8635;-4.0039,.0539,-1.7645;-5.3692,.6116,-.7795;-5.3214,-1.081,-1.3495;-1.6432,.5634,.5524;-2.1593,.1447,2.1985;-2.9975,1.4511,1.3143;-5.5384,-.109,2.3099;-5.8917,-1.7242,1.642;-4.5867,-1.5188,2.8519;-5.0614,-4.0258,.8781;-3.516,-4.3545,1.7443;-4.3576,-5.6819,.8574;4.2822,-2.197,-.1732;4.1384,-3.2956,-1.0329;3.4944,-4.4539,-.6146;2.9988,-4.5084,.6826;3.1489,-3.449,1.5726;3.7841,-2.2934,1.1359;4.4937,-3.2255,-2.0643;3.352,-5.295,-1.2935;2.2602,-5.6957,1.1145;2.7432,-3.529,2.5822;3.8788,-1.4451,1.8151;-.4917,4.0194,.0484;-1.8628,3.8087,-.014;-2.403,3.2884,-1.185;-1.6137,3.0033,-2.2964;-.243,3.2126,-2.2147;-.0451,4.3836,.9768;-2.5103,4.0196,.8378;-3.839,3.0034,-1.2407;-2.0746,2.6087,-3.2027;.3894,2.9656,-3.0689;2.1661,-5.9058,2.3028;1.7661,-6.3985,.2518;-4.3232,2.7282,-2.3172;-4.4655,3.0406,-.1982;6.6195,.1635,-2.0335;5.9444,1.4106,-1.8922;7.7959,.0919,-2.8298;8.2701,1.1991,-3.4884;8.3107,-.8697,-2.9187;9.1723,1.1317,-4.1027;6.444,2.5312,-2.6134;7.575,2.4282,-3.3871;5.9129,3.4833,-2.5549;7.9376,3.3026,-3.9349;4.5796,3.9057,-.2535;3.761,5.0566,-.0579;5.9305,3.9601,.1919;6.4488,5.1058,.746;6.5602,3.0735,.0962;7.4895,5.1215,1.0818;4.33,6.2322,.5053;5.6465,6.2628,.893;3.6923,7.1119,.6357;6.0727,7.1706,1.3288;-2.3473,-3.9286,-2.8755;-2.5323,-4.9642,-2.5516;-3.2176,-3.6023,-3.4758;-1.4705,-3.924,-3.5423;-1.6902,-1.5952,-2.0919;-2.4256,-1.1187,-2.7651;-1.525,-.935,-1.2259;-.7404,-1.6393,-2.6487;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930252627</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000465453251 0.000070445723 0.022718476153 0.005306880787</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057093349 -0.000097394 0.000053251 0.000166572 0.000325184 0.000369543 0.000408823 0.000512751 0.000655129 0.000826358 0.000962216 0.001016383 0.001180963 0.001284833 0.001418257 0.001492861 0.001654582 0.001801645 0.002002211 0.002313078 0.002544708 0.002763438 0.002919170 0.003192196 0.003561962 0.003666705 0.004062885 0.004589679 0.004846490 0.005022348 0.005154038 0.005324157 0.006096486 0.006435371 0.006538304 0.006919199 0.007142818 0.007509262 0.008182063 0.008719289 0.008865914 0.009554405 0.009873704 0.009941613 0.010995621 0.011189221 0.011898239 0.012575969 0.013380660 0.013795537 0.014064945 0.014625664 0.014956095 0.015459647 0.015891031 0.016614360 0.016830225 0.018591449 0.018980189 0.019434410 0.020282200 0.020439429 0.021569109 0.021862756 0.022492125 0.022786516 0.023496103 0.023823586 0.024519169 0.025898367 0.026639434 0.026905006 0.027210472 0.027540365 0.028325120 0.029072944 0.030930403 0.031540729 0.031989430 0.034103293 0.034670025 0.036037243 0.039051152 0.039535638 0.041984576 0.045412864 0.046142203 0.046790971 0.048888310 0.049695949 0.049911532 0.050834260 0.051538419 0.052189794 0.052288735 0.052413103 0.052980827 0.053621756 0.054923663 0.056108702 0.056435688 0.056727255 0.057016970 0.057250557 0.057760009 0.058602437 0.059246455 0.059722516 0.061366204 0.062116271 0.062911688 0.064235425 0.064570130 0.065069289 0.066019252 0.067510546 0.067947273 0.068992467 0.070528572 0.072135706 0.072601252 0.072939671 0.073014937 0.074769270 0.078742681 0.080871893 0.081725791 0.083352403 0.084542615 0.087674848 0.088974543 0.089421843 0.089848486 0.091319505 0.093335839 0.094581398 0.095496383 0.096240676 0.096858787 0.098515661 0.100157282 0.100703078 0.102754036 0.103913637 0.104329711 0.106588164 0.109178288 0.110996174 0.112288370 0.112850806 0.113827218 0.114772844 0.116975052 0.117204446 0.118640445 0.119250331 0.120591254 0.122317004 0.125152301 0.125854199 0.128542884 0.129014266 0.131011525 0.133745977 0.136455957 0.137729647 0.138622884 0.139647824 0.140552787 0.143515970 0.144665140 0.145932338 0.146807876 0.151995081 0.153626156 0.154238972 0.160781746 0.161087902 0.168560451 0.171464855 0.176054324 0.179111094 0.181630936 0.184488072 0.189108613 0.190101570 0.191858264 0.201314022 0.202227535 0.206291285 0.206967519 0.207266817 0.212371462 0.212580949 0.215630651 0.217039086 0.220435240 0.220971382 0.224612196 0.225092706 0.226936542 0.231872772 0.234590172 0.235878635 0.238569839 0.246407929 0.249044901 0.252231670 0.256564523 0.257225073 0.258283325 0.262584415 0.271579871 0.282924679 0.292024451 0.300036738 0.300172796 0.301063650 0.307137743 0.307787656 0.309853771 0.320045484 0.321362565 0.326461561 0.330621866 0.336652058 0.347765755 0.352026114 0.355653343 0.360871863 0.362063154 0.364150977 0.384572934 0.407209141 0.414483678 0.430281625 0.432169430 0.435283780 0.450938291 0.464690754 0.475644104 0.478839538 0.480427689 0.486658261 0.498900927 0.503951516 0.515229660 0.518063358 0.543820775 0.566940422 0.567717107 0.586608764 0.592185380 0.605872283 0.644277643 0.645520853 0.668035885 0.675680556 0.687373802 0.704014687 0.704364054 0.705534821 0.709786696 0.717257045 0.734169368 0.738029864 0.739763861 0.747591901 0.750825279 0.771615835 0.775987341 0.809019025 0.821848103 0.824101163 0.828942844 0.834302261 0.847810849 0.849523847 0.851406845 0.854603506 0.863400331 0.867473611 0.875920663 0.887508876 0.891128658 0.892472776 0.893608141 0.902131095 0.910301786 0.918073565 0.923509077 0.924605312 0.932017322 0.935775202 0.956103167 0.962949684 0.965241467 0.970111651 0.978145800 0.982602702 0.998650011 1.013009792 1.016235803 1.021912055 1.040207991 1.055120552 1.071220170 1.072711048 1.079486470 1.087385128 1.108517327 1.110428746 1.118025274 1.119107807 1.122630901 1.123954899 1.141890422 1.149186563 1.161762501 1.170192435 1.177292031 1.188004637 1.200764824 1.222058072 1.234141614 1.258199293 1.296486095 1.298318269 1.314742857 1.326481426 1.327534991 1.330252669 1.331409264 1.334796962 1.342448585 1.349186974 1.368194283 1.380010402 1.381337219 1.381862751 1.429590214 1.517139658 1.557997762 1.684805129 1.922988570</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">257</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91478465" y3="-0.95517244" z3="-0.68782984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59418086" y3="-1.95176771" z3="-1.56147245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07743545" y3="-0.9972459" z3="-1.42212853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77107115" y3="1.47694863" z3="-1.07077434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28495078" y3="0.31100283" z3="-0.50451854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6525768" y3="2.7393395" z3="-1.15028298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00321446" y3="2.73560289" z3="-0.84971044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38092802" y3="4.99545849" z3="-0.37022002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80771019" y3="3.85471809" z3="-0.88089667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7561904" y3="5.8715513" z3="-0.16943046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08394031" y3="1.61433831" z3="-1.67328365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1278546" y3="0.35924897" z3="0.21808345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71032859" y3="0.38646384" z3="-0.63354172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60993315" y3="0.73650623" z3="0.29905664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65594877" y3="-0.8539819" z3="-1.49730803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09460641" y3="-2.47364373" z3="-1.31762936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04324727" y3="-5.49643269" z3="-6.26205662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77242273" y3="-5.06095206" z3="-5.29601852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06266314" y3="-3.9177154" z3="-2.84327786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73869335" y3="-3.68036446" z3="-5.15029961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47981632" y3="-5.88653026" z3="-4.20758362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13948897" y3="-5.30878391" z3="-2.99099013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39284" y3="-3.07692579" z3="-3.93064114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97388595" y3="-3.01390104" z3="-5.9837592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53042101" y3="-6.97434868" z3="-4.29990399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94919381" y3="-5.94110188" z3="-2.1196166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65612037" y3="-3.36859371" z3="-1.60038202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34415801" y3="-3.85200934" z3="-0.85560819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68544322" y3="-4.85533429" z3="-1.12358757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38181632" y3="-3.54810974" z3="0.592448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41539587" y3="-3.06964374" z3="3.35030967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68778056" y3="-4.58241709" z3="1.48555553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11219993" y3="-2.27024111" z3="1.09162054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12557145" y3="-2.03333926" z3="2.46184744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69546315" y3="-4.34569854" z3="2.85904213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87792935" y3="-5.59087874" z3="1.10683441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09575541" y3="-1.43111761" z3="0.42686346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09956669" y3="-1.02477067" z3="2.81923307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90024476" y3="-5.16939579" z3="3.54774532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41471064" y3="-2.8876008" z3="4.42901277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3461105" y3="-1.74111215" z3="-3.90267867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47313972" y3="-1.33372024" z3="-3.00016813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33668511" y3="3.71576106" z3="-1.03449076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13064131" y3="-2.98946937" z3="-1.71278044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91889173" y3="-3.16341139" z3="-0.57105102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11275217" y3="-2.2854478" z3="0.35798355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8388645" y3="-0.71865436" z3="0.60986524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69395339" y3="-0.24556714" z3="-0.97933484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53036793" y3="0.45161104" z3="1.20688156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08839263" y3="-1.05718237" z3="1.96112927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40316548" y3="-4.37353006" z3="-0.33291478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12086533" y3="-4.60923874" z3="0.86913131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99263041" y3="0.06538297" z3="-1.76947775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36674649" y3="0.61042914" z3="-0.7894863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30672421" y3="-1.07851426" z3="-1.3693657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6413049" y3="0.5576369" z3="0.55856188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16811165" y3="0.13849455" z3="2.20161836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99775136" y3="1.44799564" z3="1.31377212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54887632" y3="-0.1087878" z3="2.29253057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90125326" y3="-1.72183464" z3="1.6192454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60388598" y3="-1.52176996" z3="2.83827705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05736803" y3="-4.02777947" z3="0.88299612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51031259" y3="-4.35140865" z3="1.74846999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35092369" y3="-5.68319332" z3="0.86688962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27842535" y3="-2.19660796" z3="-0.17505565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13626762" y3="-3.29705678" z3="-1.03276642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49441197" y3="-4.45581117" z3="-0.61214774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99892815" y3="-4.50880267" z3="0.68514625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14720774" y3="-3.44744702" z3="1.57318492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78053188" y3="-2.29155039" z3="1.13430123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49155823" y3="-3.22846102" z3="-2.06423148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35382317" y3="-5.29892769" z3="-1.2893658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26244888" y3="-5.696704" z3="1.11927654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74177055" y3="-3.52629868" z3="2.58295918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87423512" y3="-1.44201639" z3="1.81213301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48902663" y3="4.01824877" z3="0.05687611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86040584" y3="3.80822526" z3="-0.00281455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40360611" y3="3.29450679" z3="-1.17540708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61706373" y3="3.01493563" z3="-2.29018378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24600542" y3="3.22306468" z3="-2.21085675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03977597" y3="4.37721433" z3="0.98610742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50593535" y3="4.01527365" z3="0.85118131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83995262" y3="3.01083967" z3="-1.22921503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08057746" y3="2.62557317" z3="-3.19740865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38404428" y3="2.9808954" z3="-3.06844065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16928134" y3="-5.90520048" z3="2.30794021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7688151" y3="-6.40155282" z3="0.25789118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32687958" y3="2.74256048" z3="-2.30642201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4642418" y3="3.04236163" z3="-0.18513562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61566848" y3="0.16263178" z3="-2.03705927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94145403" y3="1.41015378" z3="-1.89515908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79200471" y3="0.09053273" z3="-2.83332539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26699809" y3="1.19775339" z3="-3.49134476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30624116" y3="-0.87137392" z3="-2.92262401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16921768" y3="1.13001143" z3="-4.10550633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44182542" y3="2.53080862" z3="-2.61568797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57280471" y3="2.42742141" z3="-3.38942963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91146242" y3="3.48346063" z3="-2.5564366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93597953" y3="3.30191147" z3="-3.93670564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5804011" y3="3.90498637" z3="-0.25328094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76323457" y3="5.05631058" z3="-0.05510603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93164328" y3="3.95706251" z3="0.19122359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45154438" y3="5.10127583" z3="0.74723488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56049645" y3="3.07002964" z3="0.09319577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49261873" y3="5.11520982" z3="1.08212394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33374802" y3="6.23026621" z3="0.51032083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65043764" y3="6.2588292" z3="0.89740926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69706461" y3="7.11048107" z3="0.64313743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07778686" y3="7.16540732" z3="1.33499969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34646482" y3="-3.93994892" z3="-2.87386335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52879372" y3="-4.97496147" z3="-2.54605147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2181855" y3="-3.61778919" z3="-3.47438746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47038896" y3="-3.93510915" z3="-3.54167422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6922736" y3="-1.60245268" z3="-2.09846385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42799723" y3="-1.12934738" z3="-2.77421062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52885303" y3="-0.9391983" z3="-1.23455417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74249895" y3="-1.64680905" z3="-2.65486403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9148,-.9552,-.6878;6.5942,-1.9518,-1.5615;6.0774,-.9972,-1.4221;4.7711,1.4769,-1.0708;4.285,.311,-.5045;2.6526,2.7393,-1.1503;4.0032,2.7356,-.8497;2.3809,4.9955,-.3702;1.8077,3.8547,-.8809;1.7562,5.8716,-.1694;2.0839,1.6143,-1.6733;3.1279,.3592,.2181;1.7103,.3865,-.6335;.6099,.7365,.2991;1.6559,-.854,-1.4973;1.0946,-2.4736,-1.3176;2.0432,-5.4964,-6.2621;1.7724,-5.061,-5.296;1.0627,-3.9177,-2.8433;1.7387,-3.6804,-5.1503;1.4798,-5.8865,-4.2076;1.1395,-5.3088,-2.991;1.3928,-3.0769,-3.9306;1.9739,-3.0139,-5.9838;1.5304,-6.9743,-4.2999;.9492,-5.9411,-2.1196;.6561,-3.3686,-1.6004;-.3442,-3.852,-.8556;-.6854,-4.8553,-1.1236;-.3818,-3.5481,.5924;-.4154,-3.0696,3.3503;-.6878,-4.5824,1.4856;-.1122,-2.2702,1.0916;-.1256,-2.0333,2.4618;-.6955,-4.3457,2.859;-.8779,-5.5909,1.1068;.0958,-1.4311,.4269;.0996,-1.0248,2.8192;-.9002,-5.1694,3.5477;-.4147,-2.8876,4.429;1.3461,-1.7411,-3.9027;1.4731,-1.3337,-3.0002;.3367,3.7158,-1.0345;-2.1306,-2.9895,-1.7128;-2.9189,-3.1634,-.5711;-3.1128,-2.2854,.358;-3.8389,-.7187,.6099;-4.694,-.2456,-.9793;-2.5304,.4516,1.2069;-5.0884,-1.0572,1.9611;-3.4032,-4.3735,-.3329;-4.1209,-4.6092,.8691;-3.9926,.0654,-1.7695;-5.3667,.6104,-.7895;-5.3067,-1.0785,-1.3694;-1.6413,.5576,.5586;-2.1681,.1385,2.2016;-2.9978,1.448,1.3138;-5.5489,-.1088,2.2925;-5.9013,-1.7218,1.6192;-4.6039,-1.5218,2.8383;-5.0574,-4.0278,.883;-3.5103,-4.3514,1.7485;-4.3509,-5.6832,.8669;4.2784,-2.1966,-.1751;4.1363,-3.2971,-1.0328;3.4944,-4.4558,-.6121;2.9989,-4.5088,.6851;3.1472,-3.4474,1.5732;3.7805,-2.2916,1.1343;4.4916,-3.2285,-2.0642;3.3538,-5.2989,-1.2894;2.2624,-5.6967,1.1193;2.7418,-3.5263,2.583;3.8742,-1.442,1.8121;-.489,4.0182,.0569;-1.8604,3.8082,-.0028;-2.4036,3.2945,-1.1754;-1.6171,3.0149,-2.2902;-.246,3.2231,-2.2109;-.0398,4.3772,.9861;-2.5059,4.0153,.8512;-3.84,3.0108,-1.2292;-2.0806,2.6256,-3.1974;.384,2.9809,-3.0684;2.1693,-5.9052,2.3079;1.7688,-6.4016,.2579;-4.3269,2.7426,-2.3064;-4.4642,3.0424,-.1851;6.6157,.1626,-2.0371;5.9415,1.4102,-1.8952;7.792,.0905,-2.8333;8.267,1.1978,-3.4913;8.3062,-.8714,-2.9226;9.1692,1.13,-4.1055;6.4418,2.5308,-2.6157;7.5728,2.4274,-3.3894;5.9115,3.4835,-2.5564;7.936,3.3019,-3.9367;4.5804,3.905,-.2533;3.7632,5.0563,-.0551;5.9316,3.9571,.1912;6.4515,5.1013,.7472;6.5605,3.07,.0932;7.4926,5.1152,1.0821;4.3337,6.2303,.5103;5.6504,6.2588,.8974;3.6971,7.1105,.6431;6.0778,7.1654,1.335;-2.3465,-3.9399,-2.8739;-2.5288,-4.975,-2.5461;-3.2182,-3.6178,-3.4744;-1.4704,-3.9351,-3.5417;-1.6923,-1.6025,-2.0985;-2.428,-1.1293,-2.7742;-1.5289,-.9392,-1.2346;-.7425,-1.6468,-2.6549;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929193961</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000797690380 0.000116809308 0.018352831439 0.005545987805</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057094673 -0.000078374 0.000041016 0.000143515 0.000303976 0.000373557 0.000407252 0.000516472 0.000658235 0.000822194 0.000959444 0.001017906 0.001181870 0.001284647 0.001418274 0.001498850 0.001654582 0.001801799 0.002008151 0.002309396 0.002544699 0.002742699 0.002922956 0.003166702 0.003557598 0.003677506 0.004035034 0.004582484 0.004833148 0.005021601 0.005154876 0.005323996 0.006093717 0.006433094 0.006536310 0.006920204 0.007143463 0.007499127 0.008181445 0.008719356 0.008864079 0.009555334 0.009867421 0.009949434 0.010994658 0.011188518 0.011895948 0.012576272 0.013380992 0.013793418 0.014053784 0.014627213 0.014951963 0.015457813 0.015890373 0.016613303 0.016818938 0.018589710 0.018981292 0.019434963 0.020282549 0.020439069 0.021566995 0.021857866 0.022492329 0.022785890 0.023495936 0.023827530 0.024518795 0.025898168 0.026638489 0.026905289 0.027209799 0.027540540 0.028325111 0.029071980 0.030930521 0.031541058 0.031968461 0.034103144 0.034671777 0.036037268 0.039051376 0.039534650 0.041984182 0.045413708 0.046138963 0.046783531 0.048887663 0.049695932 0.049911924 0.050835024 0.051538571 0.052189628 0.052288738 0.052413308 0.052982512 0.053621472 0.054924072 0.056109347 0.056436861 0.056727595 0.057016992 0.057249052 0.057760204 0.058602772 0.059247080 0.059722845 0.061368325 0.062116470 0.062912678 0.064238593 0.064571204 0.065070849 0.066018813 0.067511086 0.067946359 0.068993726 0.070527996 0.072137786 0.072600402 0.072937881 0.073001005 0.074743381 0.078746442 0.080871290 0.081734017 0.083352553 0.084542230 0.087662649 0.088974764 0.089422352 0.089847982 0.091319276 0.093335801 0.094581510 0.095496832 0.096241031 0.096858965 0.098515329 0.100158815 0.100703496 0.102754463 0.103919959 0.104330566 0.106591352 0.109181281 0.111001918 0.112289362 0.112851915 0.113832131 0.114773207 0.116975846 0.117208053 0.118643254 0.119251059 0.120592836 0.122318805 0.125149450 0.125855732 0.128543765 0.129015024 0.131009726 0.133750354 0.136456808 0.137731385 0.138622772 0.139648526 0.140553408 0.143516098 0.144665235 0.145932267 0.146808323 0.151998615 0.153622495 0.154238046 0.160781564 0.161080167 0.168560860 0.171464853 0.176053667 0.179110946 0.181631273 0.184489435 0.189109351 0.190109687 0.191857383 0.201314294 0.202227701 0.206290939 0.206967446 0.207266970 0.212376092 0.212581238 0.215632219 0.217044204 0.220433856 0.220971200 0.224608349 0.225103750 0.226972021 0.231873330 0.234590600 0.235893894 0.238571824 0.246404478 0.249024998 0.252270476 0.256565121 0.257224828 0.258283562 0.262585222 0.271579925 0.282925192 0.292025662 0.300035550 0.300172359 0.301065680 0.307138455 0.307787715 0.309853195 0.320051816 0.321362548 0.326461581 0.330628346 0.336652792 0.347766981 0.352026746 0.355653513 0.360865441 0.362063586 0.364151560 0.384572920 0.407209842 0.414484451 0.430282525 0.432170471 0.435286540 0.450939870 0.464690961 0.475641466 0.478841025 0.480430916 0.486656293 0.498900996 0.503953559 0.515231017 0.518070958 0.543823188 0.566940824 0.567717130 0.586609553 0.592182852 0.605875071 0.644275899 0.645522641 0.668036111 0.675680578 0.687373462 0.704017119 0.704364378 0.705490302 0.709785425 0.717258145 0.734176974 0.738029891 0.739760834 0.747590690 0.750827838 0.771615846 0.775987710 0.809019220 0.821848513 0.824105113 0.828942855 0.834302732 0.847837143 0.849525941 0.851407407 0.854603717 0.863402470 0.867473605 0.875923178 0.887514637 0.891130053 0.892473326 0.893609974 0.902132449 0.910312746 0.918073065 0.923494326 0.924604682 0.932017971 0.935775698 0.956103321 0.962949796 0.965242168 0.970110144 0.978130743 0.982603016 0.998650337 1.013010076 1.016237634 1.021914302 1.040208375 1.055121187 1.071224852 1.072711837 1.079489632 1.087386171 1.108519952 1.110429269 1.118046425 1.119114881 1.122631482 1.123958282 1.141890609 1.149211684 1.161762486 1.170192500 1.177293033 1.188033227 1.200765711 1.222058245 1.234148780 1.258199178 1.296486851 1.298318567 1.314742907 1.326481308 1.327534448 1.330251859 1.331410252 1.334797197 1.342448608 1.349190844 1.368236246 1.380011157 1.381337202 1.381866696 1.429590305 1.517129647 1.557997726 1.684804987 1.922984287</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">258</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91357172" y3="-0.95622004" z3="-0.69280081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59222296" y3="-1.95077127" z3="-1.57015156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07526746" y3="-0.99668363" z3="-1.4287433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76880489" y3="1.4763992" z3="-1.07189392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28329595" y3="0.30941537" z3="-0.50740205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65006717" y3="2.73852948" z3="-1.14842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00070709" y3="2.73430414" z3="-0.84770582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3774962" y3="4.99218339" z3="-0.36099478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80472864" y3="3.85297896" z3="-0.8755143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75256117" y3="5.86748965" z3="-0.15834141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08187487" y3="1.61451787" z3="-1.67439121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12615989" y3="0.35635759" z3="0.21522333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70902847" y3="0.38438736" z3="-0.63676856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60845257" y3="0.73264555" z3="0.29640664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65526996" y3="-0.85492513" z3="-1.5020395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09589236" y3="-2.47551227" z3="-1.31823913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04215115" y3="-5.5074112" z3="-6.25800824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77162973" y3="-5.06995598" z3="-5.29273263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06251634" y3="-3.92164977" z3="-2.84206172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73879866" y3="-3.68906048" z3="-5.14955668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47850646" y3="-5.89333009" z3="-4.20272096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13847897" y3="-5.31309906" z3="-2.98717432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3933499" y3="-3.08311899" z3="-3.93096995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97437243" y3="-3.02428415" z3="-5.98428444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52842438" y3="-6.98136094" z3="-4.29304398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94812817" y3="-5.94371814" z3="-2.11458108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65623911" y3="-3.36951546" z3="-1.60031345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34269297" y3="-3.85253057" z3="-0.85308563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68435678" y3="-4.85622111" z3="-1.11929407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37864336" y3="-3.54690799" z3="0.59461808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40665742" y3="-3.0662325" z3="3.35238457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68028326" y3="-4.58084507" z3="1.48943854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11161821" y3="-2.2675549" z3="1.09186159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12230215" y3="-2.02948856" z3="2.46192362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68617031" y3="-4.34214088" z3="2.862552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86834617" y3="-5.59046029" z3="1.11228788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09226193" y3="-1.42817364" z3="0.42602265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10130635" y3="-1.02012324" z3="2.81776476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88709564" y3="-5.16581183" z3="3.55290602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4045573" y3="-2.882775" z3="4.43080396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34774988" y3="-1.74727433" z3="-3.90545688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47334074" y3="-1.33826069" z3="-3.00349645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33399162" y3="3.71534954" z3="-1.03108441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13044717" y3="-2.99172249" z3="-1.71064356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91750882" y3="-3.16175585" z3="-0.56779136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11122526" y3="-2.28053637" z3="0.35809407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83652926" y3="-0.71177947" z3="0.60297962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68429511" y3="-0.23845267" z3="-0.99057256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52833622" y3="0.45638011" z3="1.20427133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09327394" y3="-1.04582107" z3="1.94895557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40005407" y3="-4.37191131" z3="-0.32380117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11501432" y3="-4.60355925" z3="0.88036781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.97969837" y3="0.07396004" z3="-1.77742331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35934276" y3="0.61664425" z3="-0.80354153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29452572" y3="-1.07150696" z3="-1.38463525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63773839" y3="0.56205953" z3="0.55801566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16878504" y3="0.14165279" z3="2.19961919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99495572" y3="1.45323286" z3="1.31131344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55226346" y3="-0.09578498" z3="2.27783768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90682701" y3="-1.70796112" z3="1.60374024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61418776" y3="-1.51149013" z3="2.82854427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05058455" y3="-4.02063306" z3="0.8957866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50149048" y3="-4.34489126" z3="1.75711625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34675366" y3="-5.67697285" z3="0.88116425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27891719" y3="-2.19856564" z3="-0.18012937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13850392" y3="-3.2994197" z3="-1.03762055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49791268" y3="-4.45863545" z3="-0.61704001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00221998" y3="-4.51198304" z3="0.6801644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14882937" y3="-3.45029966" z3="1.56803688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7807196" y3="-2.29379489" z3="1.12912792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49384476" y3="-3.23059114" z3="-2.06901873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3580293" y3="-5.30142581" z3="-1.29434866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26720835" y3="-5.70046677" z3="1.11440556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74318577" y3="-3.52925378" z3="2.57770983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87262812" y3="-1.44370405" z3="1.80678086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49263112" y3="4.01762748" z3="0.05936855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86423193" y3="3.81041592" z3="-0.00333472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40674943" y3="3.29917924" z3="-1.17711905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61926075" y3="3.01995497" z3="-2.29113553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24819281" y3="3.22606508" z3="-2.20982196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04436578" y3="4.37477167" z3="0.98951675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51028143" y3="4.01691629" z3="0.85072886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84353696" y3="3.01820097" z3="-1.23316963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0822263" y3="2.63295698" z3="-3.19976203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38284146" y3="2.98352999" z3="-3.06587131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17573497" y3="-5.90986003" z3="2.30296139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77287022" y3="-6.40485702" z3="0.25318508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33037928" y3="2.75510241" z3="-2.31160985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46817769" y3="3.0465332" z3="-0.18925493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61235864" y3="0.16427429" z3="-2.04270456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.93842249" y3="1.41149684" z3="-1.89740179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.78729539" y3="0.09367845" z3="-2.84128312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26129626" y3="1.20215989" z3="-3.49790005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30119654" y3="-0.8680903" z3="-2.93362673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16231816" y3="1.13549081" z3="-4.1140664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.437931" y3="2.53368258" z3="-2.61608767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.56763695" y3="2.43174478" z3="-3.39200613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90773847" y3="3.48617629" z3="-2.55402677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93015977" y3="3.30729683" z3="-3.93798965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57745393" y3="3.90178549" z3="-0.24726115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75982791" y3="5.05219296" z3="-0.04530692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92846302" y3="3.9525859" z3="0.19816109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44765142" y3="5.09482879" z3="0.75868196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55750062" y3="3.06613131" z3="0.09778674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48831994" y3="5.10781945" z3="1.0946569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32980589" y3="6.22417045" z3="0.52433857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6463444" y3="6.25154696" z3="0.9122697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69283195" y3="7.10359606" z3="0.65969062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07321334" y3="7.15651327" z3="1.35335252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34659205" y3="-3.94623529" z3="-2.8681757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53029691" y3="-4.9794982" z3="-2.53641608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21751352" y3="-3.62535747" z3="-3.47040999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47022162" y3="-3.94578702" z3="-3.5356177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69202819" y3="-1.60633249" z3="-2.10116352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42758823" y3="-1.13596717" z3="-2.77823769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5288157" y3="-0.93964079" z3="-1.23970653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74154531" y3="-1.65228505" z3="-2.65665859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9136,-.9562,-.6928;6.5922,-1.9508,-1.5702;6.0753,-.9967,-1.4287;4.7688,1.4764,-1.0719;4.2833,.3094,-.5074;2.6501,2.7385,-1.1484;4.0007,2.7343,-.8477;2.3775,4.9922,-.361;1.8047,3.853,-.8755;1.7526,5.8675,-.1583;2.0819,1.6145,-1.6744;3.1262,.3564,.2152;1.709,.3844,-.6368;.6085,.7326,.2964;1.6553,-.8549,-1.502;1.0959,-2.4755,-1.3182;2.0422,-5.5074,-6.258;1.7716,-5.07,-5.2927;1.0625,-3.9216,-2.8421;1.7388,-3.6891,-5.1496;1.4785,-5.8933,-4.2027;1.1385,-5.3131,-2.9872;1.3933,-3.0831,-3.931;1.9744,-3.0243,-5.9843;1.5284,-6.9814,-4.293;.9481,-5.9437,-2.1146;.6562,-3.3695,-1.6003;-.3427,-3.8525,-.8531;-.6844,-4.8562,-1.1193;-.3786,-3.5469,.5946;-.4067,-3.0662,3.3524;-.6803,-4.5808,1.4894;-.1116,-2.2676,1.0919;-.1223,-2.0295,2.4619;-.6862,-4.3421,2.8626;-.8683,-5.5905,1.1123;.0923,-1.4282,.426;.1013,-1.0201,2.8178;-.8871,-5.1658,3.5529;-.4046,-2.8828,4.4308;1.3477,-1.7473,-3.9055;1.4733,-1.3383,-3.0035;.334,3.7153,-1.0311;-2.1304,-2.9917,-1.7106;-2.9175,-3.1618,-.5678;-3.1112,-2.2805,.3581;-3.8365,-.7118,.603;-4.6843,-.2385,-.9906;-2.5283,.4564,1.2043;-5.0933,-1.0458,1.949;-3.4001,-4.3719,-.3238;-4.115,-4.6036,.8804;-3.9797,.074,-1.7774;-5.3593,.6166,-.8035;-5.2945,-1.0715,-1.3846;-1.6377,.5621,.558;-2.1688,.1417,2.1996;-2.995,1.4532,1.3113;-5.5523,-.0958,2.2778;-5.9068,-1.708,1.6037;-4.6142,-1.5115,2.8285;-5.0506,-4.0206,.8958;-3.5015,-4.3449,1.7571;-4.3468,-5.677,.8812;4.2789,-2.1986,-.1801;4.1385,-3.2994,-1.0376;3.4979,-4.4586,-.617;3.0022,-4.512,.6802;3.1488,-3.4503,1.568;3.7807,-2.2938,1.1291;4.4938,-3.2306,-2.069;3.358,-5.3014,-1.2943;2.2672,-5.7005,1.1144;2.7432,-3.5293,2.5777;3.8726,-1.4437,1.8068;-.4926,4.0176,.0594;-1.8642,3.8104,-.0033;-2.4067,3.2992,-1.1771;-1.6193,3.02,-2.2911;-.2482,3.2261,-2.2098;-.0444,4.3748,.9895;-2.5103,4.0169,.8507;-3.8435,3.0182,-1.2332;-2.0822,2.633,-3.1998;.3828,2.9835,-3.0659;2.1757,-5.9099,2.303;1.7729,-6.4049,.2532;-4.3304,2.7551,-2.3116;-4.4682,3.0465,-.1893;6.6124,.1643,-2.0427;5.9384,1.4115,-1.8974;7.7873,.0937,-2.8413;8.2613,1.2022,-3.4979;8.3012,-.8681,-2.9336;9.1623,1.1355,-4.1141;6.4379,2.5337,-2.6161;7.5676,2.4317,-3.392;5.9077,3.4862,-2.554;7.9302,3.3073,-3.938;4.5775,3.9018,-.2473;3.7598,5.0522,-.0453;5.9285,3.9526,.1982;6.4477,5.0948,.7587;6.5575,3.0661,.0978;7.4883,5.1078,1.0947;4.3298,6.2242,.5243;5.6463,6.2515,.9123;3.6928,7.1036,.6597;6.0732,7.1565,1.3534;-2.3466,-3.9462,-2.8682;-2.5303,-4.9795,-2.5364;-3.2175,-3.6254,-3.4704;-1.4702,-3.9458,-3.5356;-1.692,-1.6063,-2.1012;-2.4276,-1.136,-2.7782;-1.5288,-.9396,-1.2397;-.7415,-1.6523,-2.6567;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925617567</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000889036559 0.000144294858 0.019186410202 0.005331047562</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057096470 -0.000030552 0.000035214 0.000164913 0.000303757 0.000374386 0.000407210 0.000525455 0.000663449 0.000822350 0.000959046 0.001019059 0.001181679 0.001284815 0.001418334 0.001503304 0.001655526 0.001803903 0.002009481 0.002309296 0.002545089 0.002742831 0.002931607 0.003168593 0.003557749 0.003687753 0.004035078 0.004582509 0.004835355 0.005021998 0.005156844 0.005328177 0.006093226 0.006433037 0.006536059 0.006920485 0.007147797 0.007499302 0.008182831 0.008719852 0.008863875 0.009557284 0.009869994 0.009952244 0.010994175 0.011188847 0.011896627 0.012576546 0.013381133 0.013793934 0.014053884 0.014627362 0.014952021 0.015457840 0.015890360 0.016614754 0.016819652 0.018590026 0.018985900 0.019435496 0.020283995 0.020439237 0.021566962 0.021857899 0.022492061 0.022786220 0.023495840 0.023829343 0.024518716 0.025898259 0.026638629 0.026905430 0.027210868 0.027540320 0.028325171 0.029072359 0.030930556 0.031542183 0.031967686 0.034103117 0.034675059 0.036037248 0.039051936 0.039534463 0.041984176 0.045414715 0.046139175 0.046784789 0.048887903 0.049695932 0.049911991 0.050835152 0.051538891 0.052189582 0.052288759 0.052413451 0.052982736 0.053621547 0.054924597 0.056109632 0.056437732 0.056728073 0.057016981 0.057248116 0.057761054 0.058603193 0.059248465 0.059722822 0.061368471 0.062116610 0.062912612 0.064241066 0.064571888 0.065071304 0.066019588 0.067511076 0.067946354 0.068993825 0.070529425 0.072139193 0.072600710 0.072937651 0.073002885 0.074743095 0.078747553 0.080871858 0.081747190 0.083352534 0.084542168 0.087662615 0.088975198 0.089422679 0.089848091 0.091319272 0.093335907 0.094581417 0.095497099 0.096241474 0.096860090 0.098515275 0.100162736 0.100703607 0.102754441 0.103922344 0.104330903 0.106596310 0.109182198 0.111007103 0.112289676 0.112853700 0.113838628 0.114773826 0.116976302 0.117216491 0.118644779 0.119253638 0.120594834 0.122319673 0.125149051 0.125855625 0.128543905 0.129015347 0.131009715 0.133753181 0.136459591 0.137733471 0.138622507 0.139649141 0.140553591 0.143516163 0.144665232 0.145932428 0.146808484 0.152001767 0.153621148 0.154238158 0.160781467 0.161082253 0.168561572 0.171464938 0.176053228 0.179111026 0.181632563 0.184490845 0.189109323 0.190116796 0.191856885 0.201314703 0.202227759 0.206290731 0.206967442 0.207267275 0.212379655 0.212581530 0.215632518 0.217045905 0.220438667 0.220972571 0.224607864 0.225110570 0.226988808 0.231874084 0.234590921 0.235905999 0.238572693 0.246405072 0.249023558 0.252306882 0.256565072 0.257224839 0.258283711 0.262585183 0.271579952 0.282925193 0.292027891 0.300039194 0.300172496 0.301067911 0.307139427 0.307788174 0.309853236 0.320057937 0.321362562 0.326461571 0.330632396 0.336653624 0.347767940 0.352026800 0.355653566 0.360865293 0.362063511 0.364151915 0.384573127 0.407210323 0.414485055 0.430282466 0.432174238 0.435286945 0.450940109 0.464692245 0.475641590 0.478842861 0.480434818 0.486657701 0.498901089 0.503953589 0.515230957 0.518073299 0.543828934 0.566941114 0.567717119 0.586610066 0.592183303 0.605875711 0.644276012 0.645524230 0.668036386 0.675680543 0.687373480 0.704016954 0.704364368 0.705504077 0.709785672 0.717258477 0.734178522 0.738030102 0.739764792 0.747590594 0.750830211 0.771615847 0.775988014 0.809021515 0.821848649 0.824108202 0.828942998 0.834302851 0.847865354 0.849527980 0.851408235 0.854604007 0.863405064 0.867473606 0.875926547 0.887525089 0.891132452 0.892473116 0.893609950 0.902132437 0.910320860 0.918074532 0.923494623 0.924604701 0.932017972 0.935777582 0.956103435 0.962950939 0.965242400 0.970110640 0.978130953 0.982602994 0.998651543 1.013010478 1.016238087 1.021918927 1.040209185 1.055121648 1.071238062 1.072711814 1.079493200 1.087387392 1.108524218 1.110430723 1.118097531 1.119133484 1.122632695 1.123965065 1.141890825 1.149254107 1.161762569 1.170192555 1.177293103 1.188069908 1.200766893 1.222058259 1.234149833 1.258201919 1.296487452 1.298321747 1.314742949 1.326481456 1.327537184 1.330251826 1.331418402 1.334797555 1.342449023 1.349190799 1.368269150 1.380011368 1.381338194 1.381868115 1.429596006 1.517131131 1.557997761 1.684804963 1.922983747</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">259</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91468643" y3="-0.95546036" z3="-0.68758259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59475144" y3="-1.9515778" z3="-1.56034492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07785317" y3="-0.9971481" z3="-1.42104646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77103026" y3="1.47674089" z3="-1.06989023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28458995" y3="0.31057235" z3="-0.50436809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65244228" y3="2.73899021" z3="-1.15050505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00288276" y3="2.73523614" z3="-0.84894943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37980854" y3="4.99484989" z3="-0.36968429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80711582" y3="3.85418833" z3="-0.88099915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75490284" y3="5.87078247" z3="-0.16959454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08432469" y3="1.61416509" z3="-1.67457275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12687293" y3="0.35843859" z3="0.21726459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71024137" y3="0.38561499" z3="-0.63567425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60894103" y3="0.7348766" z3="0.29620552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65700769" y3="-0.85447295" z3="-1.49996703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09479961" y3="-2.47365594" z3="-1.31878916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03947571" y3="-5.49785069" z3="-6.2633231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76934714" y3="-5.06196581" z3="-5.2972384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06124711" y3="-3.91770303" z3="-2.84442382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73579124" y3="-3.681314" z3="-5.15203727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47746109" y3="-5.88707778" z3="-4.2082502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13793048" y3="-5.30884228" z3="-2.9916073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3907938" y3="-3.0773921" z3="-3.93235476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97040648" y3="-3.01519328" z3="-5.98594354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52794589" y3="-6.97492229" z3="-4.30022116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94822062" y3="-5.94080501" z3="-2.11985308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6552961" y3="-3.36775168" z3="-1.60164756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34424643" y3="-3.85118673" z3="-0.85565133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68583636" y3="-4.85456218" z3="-1.12313527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38067027" y3="-3.54710609" z3="0.59238766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41186258" y3="-3.06862915" z3="3.35041034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68528976" y3="-4.58138486" z3="1.4858873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11166978" y3="-2.2688545" z3="1.09117695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12398478" y3="-2.03187826" z3="2.46138778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.692368" y3="-4.34417273" z3="2.85924835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87487784" y3="-5.59020684" z3="1.10751967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09488116" y3="-1.42941852" z3="0.42627841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10094821" y3="-1.02321746" z3="2.81849006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89582793" y3="-5.16804928" z3="3.54843688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41071353" y3="-2.88626957" z3="4.42901858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34407982" y3="-1.74157835" z3="-3.90477694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47200783" y3="-1.33407724" z3="-3.00243421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33636312" y3="3.71516532" z3="-1.03596825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13120436" y3="-2.98883884" z3="-1.71153769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9186956" y3="-3.16271213" z3="-0.5693814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11211211" y3="-2.28478024" z3="0.35969068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83811898" y3="-0.71773394" z3="0.61116945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69437114" y3="-0.24551723" z3="-0.97779017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52973641" y3="0.4534112" z3="1.20653577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08637382" y3="-1.05573578" z3="1.96371642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40207365" y3="-4.37327455" z3="-0.33031626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1187229" y3="-4.6089776" z3="0.87221927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99331266" y3="0.06227977" z3="-1.76931451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36502794" y3="0.61246679" z3="-0.78924652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30951347" y3="-1.07760646" z3="-1.36562403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64089486" y3="0.55920365" z3="0.55791891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16706434" y3="0.14138633" z3="2.20149101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99740326" y3="1.449778" z3="1.31279943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54645164" y3="-0.10724253" z3="2.29532136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89955582" y3="-1.72050111" z3="1.62292665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60099071" y3="-1.52000897" z3="2.84049741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05492739" y3="-4.02719014" z3="0.88735613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50710882" y3="-4.35169925" z3="1.75080434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34923966" y3="-5.68265086" z3="0.86986447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27824071" y3="-2.19723794" z3="-0.1757398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13652434" y3="-3.29711494" z3="-1.03421723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49471787" y3="-4.45611368" z3="-0.61459781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99909411" y3="-4.51011134" z3="0.68260723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14681334" y3="-3.44932214" z3="1.57135201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77985068" y3="-2.29299701" z3="1.13335969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49200288" y3="-3.2276854" z3="-2.0655401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3541195" y3="-5.29844113" z3="-1.29252362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26304295" y3="-5.69846161" z3="1.11586054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74113352" y3="-3.52886801" z3="2.58097046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87284796" y3="-1.44366823" z3="1.81167385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49041308" y3="4.01865292" z3="0.05401608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86165844" y3="3.80857044" z3="-0.00712608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40370547" y3="3.29383952" z3="-1.17971039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61615423" y3="3.01361655" z3="-2.29358099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24528459" y3="3.22199182" z3="-2.21299823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04222009" y3="4.37835261" z3="0.98338985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50789356" y3="4.01596811" z3="0.84637848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83993777" y3="3.0098511" z3="-1.23455873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07872858" y3="2.6235215" z3="-3.20096144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38583012" y3="2.97876945" z3="-3.06928471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1704503" y3="-5.90816434" z3="2.30432777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76915107" y3="-6.40247269" z3="0.25399064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.325972" y3="2.74048868" z3="-2.31179514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46499851" y3="3.04220806" z3="-0.19105069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61640708" y3="0.16296001" z3="-2.03526074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94200739" y3="1.41034339" z3="-1.8934581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79324265" y3="0.09116798" z3="-2.83083198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26858118" y3="1.19856747" z3="-3.48828565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30756439" y3="-0.87065997" z3="-2.92008793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17116036" y3="1.13104237" z3="-4.10198162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44275934" y3="2.53119712" z3="-2.61339295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5742369" y3="2.4280978" z3="-3.38648623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91224235" y3="3.48370437" z3="-2.55441479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93768727" y3="3.30270926" z3="-3.93336412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57944087" y3="3.90444723" z3="-0.25159675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76201087" y3="5.05568967" z3="-0.05376031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93027117" y3="3.95644529" z3="0.19419457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44967329" y3="5.10053654" z3="0.75078483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55911727" y3="3.06945933" z3="0.09687781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49034779" y3="5.1144188" z3="1.08682301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33211073" y3="6.22954108" z3="0.51205981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64856993" y3="6.25803561" z3="0.90014468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6953166" y3="7.10968264" z3="0.64433452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07559281" y3="7.16453099" z3="1.33803617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34729093" y3="-3.93953733" z3="-2.87225088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52999902" y3="-4.97421134" z3="-2.54413278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21883017" y3="-3.61725945" z3="-3.472941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47119239" y3="-3.93565923" z3="-3.54000254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69326301" y3="-1.60194143" z3="-2.09775917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42928228" y3="-1.12935358" z3="-2.77310371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52958807" y3="-0.93816064" z3="-1.23426331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74328397" y3="-1.64625194" z3="-2.65414042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9147,-.9555,-.6876;6.5948,-1.9516,-1.5603;6.0779,-.9971,-1.421;4.771,1.4767,-1.0699;4.2846,.3106,-.5044;2.6524,2.739,-1.1505;4.0029,2.7352,-.8489;2.3798,4.9948,-.3697;1.8071,3.8542,-.881;1.7549,5.8708,-.1696;2.0843,1.6142,-1.6746;3.1269,.3584,.2173;1.7102,.3856,-.6357;.6089,.7349,.2962;1.657,-.8545,-1.5;1.0948,-2.4737,-1.3188;2.0395,-5.4979,-6.2633;1.7693,-5.062,-5.2972;1.0612,-3.9177,-2.8444;1.7358,-3.6813,-5.152;1.4775,-5.8871,-4.2083;1.1379,-5.3088,-2.9916;1.3908,-3.0774,-3.9324;1.9704,-3.0152,-5.9859;1.5279,-6.9749,-4.3002;.9482,-5.9408,-2.1199;.6553,-3.3678,-1.6016;-.3442,-3.8512,-.8557;-.6858,-4.8546,-1.1231;-.3807,-3.5471,.5924;-.4119,-3.0686,3.3504;-.6853,-4.5814,1.4859;-.1117,-2.2689,1.0912;-.124,-2.0319,2.4614;-.6924,-4.3442,2.8592;-.8749,-5.5902,1.1075;.0949,-1.4294,.4263;.1009,-1.0232,2.8185;-.8958,-5.168,3.5484;-.4107,-2.8863,4.429;1.3441,-1.7416,-3.9048;1.472,-1.3341,-3.0024;.3364,3.7152,-1.036;-2.1312,-2.9888,-1.7115;-2.9187,-3.1627,-.5694;-3.1121,-2.2848,.3597;-3.8381,-.7177,.6112;-4.6944,-.2455,-.9778;-2.5297,.4534,1.2065;-5.0864,-1.0557,1.9637;-3.4021,-4.3733,-.3303;-4.1187,-4.609,.8722;-3.9933,.0623,-1.7693;-5.365,.6125,-.7892;-5.3095,-1.0776,-1.3656;-1.6409,.5592,.5579;-2.1671,.1414,2.2015;-2.9974,1.4498,1.3128;-5.5465,-.1072,2.2953;-5.8996,-1.7205,1.6229;-4.601,-1.52,2.8405;-5.0549,-4.0272,.8874;-3.5071,-4.3517,1.7508;-4.3492,-5.6827,.8699;4.2782,-2.1972,-.1757;4.1365,-3.2971,-1.0342;3.4947,-4.4561,-.6146;2.9991,-4.5101,.6826;3.1468,-3.4493,1.5714;3.7799,-2.293,1.1334;4.492,-3.2277,-2.0655;3.3541,-5.2984,-1.2925;2.263,-5.6985,1.1159;2.7411,-3.5289,2.581;3.8728,-1.4437,1.8117;-.4904,4.0187,.054;-1.8617,3.8086,-.0071;-2.4037,3.2938,-1.1797;-1.6162,3.0136,-2.2936;-.2453,3.222,-2.213;-.0422,4.3784,.9834;-2.5079,4.016,.8464;-3.8399,3.0099,-1.2346;-2.0787,2.6235,-3.201;.3858,2.9788,-3.0693;2.1705,-5.9082,2.3043;1.7692,-6.4025,.254;-4.326,2.7405,-2.3118;-4.465,3.0422,-.1911;6.6164,.163,-2.0353;5.942,1.4103,-1.8935;7.7932,.0912,-2.8308;8.2686,1.1986,-3.4883;8.3076,-.8707,-2.9201;9.1712,1.131,-4.102;6.4428,2.5312,-2.6134;7.5742,2.4281,-3.3865;5.9122,3.4837,-2.5544;7.9377,3.3027,-3.9334;4.5794,3.9044,-.2516;3.762,5.0557,-.0538;5.9303,3.9564,.1942;6.4497,5.1005,.7508;6.5591,3.0695,.0969;7.4903,5.1144,1.0868;4.3321,6.2295,.5121;5.6486,6.258,.9001;3.6953,7.1097,.6443;6.0756,7.1645,1.338;-2.3473,-3.9395,-2.8723;-2.53,-4.9742,-2.5441;-3.2188,-3.6173,-3.4729;-1.4712,-3.9357,-3.54;-1.6933,-1.6019,-2.0978;-2.4293,-1.1294,-2.7731;-1.5296,-.9382,-1.2343;-.7433,-1.6463,-2.6541;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930926084</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000167616996 0.000028519615 0.017977196467 0.005301279175</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002684691943 0.001789794629</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057100593 -0.000199885 0.000061104 0.000159139 0.000306222 0.000370650 0.000406629 0.000527214 0.000668563 0.000821624 0.000958417 0.001019807 0.001180025 0.001284951 0.001419527 0.001506502 0.001655458 0.001804175 0.002009447 0.002309799 0.002543731 0.002742967 0.002941000 0.003164358 0.003558744 0.003702008 0.004033267 0.004582556 0.004839003 0.005022247 0.005161879 0.005330381 0.006088589 0.006432791 0.006536112 0.006921995 0.007157102 0.007500145 0.008184742 0.008719323 0.008862295 0.009560002 0.009872122 0.009953488 0.010992126 0.011188793 0.011897789 0.012577146 0.013381730 0.013795194 0.014053563 0.014627565 0.014951954 0.015458478 0.015890393 0.016615030 0.016822108 0.018590169 0.018989937 0.019435879 0.020286606 0.020440055 0.021566948 0.021857788 0.022491288 0.022787281 0.023496027 0.023831227 0.024518835 0.025898350 0.026638794 0.026905521 0.027212532 0.027540484 0.028325039 0.029073429 0.030930554 0.031543086 0.031962847 0.034103293 0.034678759 0.036037143 0.039052435 0.039534720 0.041984349 0.045416605 0.046139743 0.046786672 0.048888420 0.049695926 0.049912136 0.050835202 0.051539280 0.052189534 0.052288788 0.052413640 0.052982775 0.053622047 0.054925289 0.056109997 0.056438420 0.056728756 0.057017038 0.057248536 0.057762576 0.058604034 0.059249965 0.059723146 0.061368779 0.062116938 0.062912755 0.064243086 0.064572812 0.065072992 0.066020491 0.067511073 0.067945942 0.068994257 0.070531532 0.072140658 0.072600904 0.072938585 0.073005313 0.074739763 0.078748787 0.080873000 0.081763880 0.083352299 0.084542249 0.087662176 0.088975818 0.089423285 0.089848031 0.091319313 0.093336365 0.094581353 0.095497468 0.096242212 0.096861327 0.098515472 0.100167742 0.100703535 0.102754276 0.103925115 0.104330360 0.106603485 0.109183282 0.111011364 0.112289761 0.112855026 0.113844881 0.114774295 0.116977152 0.117223927 0.118646073 0.119256159 0.120596980 0.122320129 0.125148866 0.125856070 0.128544475 0.129015593 0.131009512 0.133755295 0.136462599 0.137735413 0.138622979 0.139650492 0.140553592 0.143516054 0.144665290 0.145932423 0.146808262 0.152006965 0.153623555 0.154238450 0.160780942 0.161082540 0.168561745 0.171465135 0.176053789 0.179111143 0.181634324 0.184492838 0.189110016 0.190127306 0.191857516 0.201315222 0.202228044 0.206291044 0.206967513 0.207267478 0.212382113 0.212581588 0.215632624 0.217049782 0.220442936 0.220973362 0.224608601 0.225113708 0.226996167 0.231874992 0.234591398 0.235916850 0.238574673 0.246405343 0.249022600 0.252337095 0.256565224 0.257224879 0.258283951 0.262585501 0.271580045 0.282925407 0.292029236 0.300040969 0.300172624 0.301069815 0.307140210 0.307788650 0.309853246 0.320063981 0.321362590 0.326461522 0.330637028 0.336655206 0.347768832 0.352026727 0.355653611 0.360867985 0.362063471 0.364152303 0.384573361 0.407210508 0.414486722 0.430282513 0.432175750 0.435287570 0.450940224 0.464692868 0.475641787 0.478844177 0.480437057 0.486658342 0.498901185 0.503952509 0.515231522 0.518074370 0.543834896 0.566941589 0.567717169 0.586610517 0.592183160 0.605876460 0.644276503 0.645525874 0.668036481 0.675680361 0.687373525 0.704017734 0.704364273 0.705509439 0.709785357 0.717259314 0.734179870 0.738030157 0.739766431 0.747591750 0.750832385 0.771615847 0.775988228 0.809022305 0.821849063 0.824110297 0.828943097 0.834303010 0.847884810 0.849529809 0.851408870 0.854604200 0.863406547 0.867473608 0.875928105 0.887530833 0.891134529 0.892473614 0.893609942 0.902132806 0.910327288 0.918075329 0.923495632 0.924604776 0.932018221 0.935778337 0.956103419 0.962951463 0.965242502 0.970110813 0.978133673 0.982603786 0.998652114 1.013010673 1.016238458 1.021920729 1.040209494 1.055121943 1.071243377 1.072712544 1.079495390 1.087388290 1.108526167 1.110431284 1.118117079 1.119141259 1.122633209 1.123967893 1.141890923 1.149277035 1.161762613 1.170192604 1.177293793 1.188090843 1.200767622 1.222058366 1.234153780 1.258203248 1.296487899 1.298323499 1.314742990 1.326481635 1.327539549 1.330251934 1.331422023 1.334797651 1.342449683 1.349190752 1.368285930 1.380011524 1.381338542 1.381869166 1.429599184 1.517132855 1.557997911 1.684805001 1.922984384</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">260</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9152562" y3="-0.95596245" z3="-0.68997319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59675581" y3="-1.95056769" z3="-1.5617925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07956408" y3="-0.99639763" z3="-1.42170501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77196351" y3="1.47688249" z3="-1.06827291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28465453" y3="0.30966729" z3="-0.50566894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65324335" y3="2.73823721" z3="-1.15267755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00277211" y3="2.73476667" z3="-0.84728573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37738343" y3="4.99248103" z3="-0.36901564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80660985" y3="3.85248415" z3="-0.88417452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75147008" y3="5.86784298" z3="-0.16875124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08749121" y3="1.61350855" z3="-1.67943265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12552568" y3="0.35610309" z3="0.21385568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7104315" y3="0.38488914" z3="-0.64185746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60764626" y3="0.73540544" z3="0.28782625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65784884" y3="-0.85503486" z3="-1.5064864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09400668" y3="-2.47352234" z3="-1.32281546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02820619" y3="-5.50316573" z3="-6.2660555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76003888" y3="-5.06623904" z3="-5.29990077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05720437" y3="-3.91935957" z3="-2.84679952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72695676" y3="-3.68541024" z3="-5.15604755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47023423" y3="-5.89021205" z3="-4.20947304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13330883" y3="-5.31065993" z3="-2.99277528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38457726" y3="-3.08017306" z3="-3.93625739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96005687" y3="-3.02021262" z3="-5.99113532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52041884" y3="-6.97819956" z3="-4.3003046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94537161" y3="-5.94168509" z3="-2.11995456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65418665" y3="-3.36865621" z3="-1.60337612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34454515" y3="-3.85061055" z3="-0.8558491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68734379" y3="-4.85377997" z3="-1.12241535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37837735" y3="-3.54588016" z3="0.59211721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40359165" y3="-3.0661225" z3="3.34983922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67975153" y3="-4.58027063" z3="1.48676856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10930605" y3="-2.26731951" z3="1.08971513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11872762" y3="-2.02964383" z3="2.45981227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68315964" y3="-4.34297484" z3="2.86019887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8701522" y3="-5.58883269" z3="1.10901546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09462159" y3="-1.42799626" z3="0.42387436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10583323" y3="-1.02052755" z3="2.81599952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88406254" y3="-5.16679884" z3="3.55015955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39963203" y3="-2.88353874" z3="4.42843883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33816795" y3="-1.74426922" z3="-3.90993843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4688295" y3="-1.33590869" z3="-3.0084248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33621594" y3="3.7132256" z3="-1.0429782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13315125" y3="-2.98738737" z3="-1.70934094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91792774" y3="-3.15942053" z3="-0.56486883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10858125" y3="-2.27991757" z3="0.36346458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83642048" y3="-0.71403011" z3="0.61484074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6977617" y3="-0.24667657" z3="-0.97241905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52764266" y3="0.45981482" z3="1.2045078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0801796" y3="-1.05077319" z3="1.9717924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40197613" y3="-4.36904618" z3="-0.32342865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11541767" y3="-4.60289063" z3="0.88163789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99899324" y3="0.05447391" z3="-1.76822818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36437013" y3="0.61445304" z3="-0.78491628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31717221" y3="-1.07871649" z3="-1.35301631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64040416" y3="0.56470401" z3="0.55358188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16223395" y3="0.15050194" z3="2.1992368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99597255" y3="1.45589782" z3="1.30949499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54025775" y3="-0.10200321" z3="2.30294113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89362106" y3="-1.7171615" z3="1.6348497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59144608" y3="-1.51244394" z3="2.84799517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0513049" y3="-4.02062443" z3="0.89835699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50136282" y3="-4.34462399" z3="1.75850758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34642594" y3="-5.67671394" z3="0.88151212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27842595" y3="-2.19833682" z3="-0.18007449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13607382" y3="-3.29705922" z3="-1.03980988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49486136" y3="-4.45685629" z3="-0.62095551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00036928" y3="-4.51249972" z3="0.67664615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14843872" y3="-3.45268944" z3="1.56641311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78085964" y3="-2.29570681" z3="1.1291875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49106014" y3="-3.2263552" z3="-2.07124217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35422356" y3="-5.29880764" z3="-1.29960037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26559286" y3="-5.70191144" z3="1.10971822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74360806" y3="-3.53362988" z3="2.57627511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87456689" y3="-1.44743423" z3="1.80843746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49364481" y3="4.01966426" z3="0.04424073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86475807" y3="3.80920151" z3="-0.01988113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40346395" y3="3.29070122" z3="-1.1924257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61279452" y3="3.00724676" z3="-2.30326887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24207309" y3="3.21606138" z3="-2.21963902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04804983" y3="4.38207679" z3="0.9738496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51351833" y3="4.01918867" z3="0.83093885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83928609" y3="3.00526522" z3="-1.24973788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07276626" y3="2.61400772" z3="-3.21059433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39142879" y3="2.97024712" z3="-3.07373189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17423456" y3="-5.9124567" z3="2.29822954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77161199" y3="-6.40603751" z3="0.24788595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32252005" y3="2.73178678" z3="-2.3271661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46680241" y3="3.04038454" z3="-0.20774645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6191555" y3="0.16490903" z3="-2.03279231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94457201" y3="1.41208749" z3="-1.8896249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79739794" y3="0.09474464" z3="-2.82637922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27400336" y3="1.20355248" z3="-3.48057861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31184814" y3="-0.86692246" z3="-2.91674035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17767554" y3="1.13728572" z3="-4.09274282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44680692" y3="2.53452084" z3="-2.60608035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57967846" y3="2.43300052" z3="-3.37729639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91636814" y3="3.48705906" z3="-2.54573111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94426483" y3="3.30882635" z3="-3.9214951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5770832" y3="3.90316963" z3="-0.24632794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75838936" y3="5.05346602" z3="-0.04847607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92670304" y3="3.95504984" z3="0.20309911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44370569" y3="5.09814146" z3="0.76405235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55659551" y3="3.06868886" z3="0.10471541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48355719" y3="5.1119358" z3="1.10280885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.325961" y3="6.22633332" z3="0.52210657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64114628" y3="6.25470648" z3="0.91435714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68816098" y3="7.10580423" z3="0.65490733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06617659" y3="7.16037618" z3="1.35601336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35277463" y3="-3.93949631" z3="-2.86830431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53519265" y3="-4.97381767" z3="-2.53836056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22581151" y3="-3.6175593" z3="-3.46706534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4783677" y3="-3.93633544" z3="-3.53830093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69484071" y3="-1.60123122" z3="-2.09864807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43113394" y3="-1.12944254" z3="-2.77473077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52987763" y3="-0.93591143" z3="-1.23667744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74584481" y3="-1.64730366" z3="-2.65622294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9153,-.956,-.69;6.5968,-1.9506,-1.5618;6.0796,-.9964,-1.4217;4.772,1.4769,-1.0683;4.2847,.3097,-.5057;2.6532,2.7382,-1.1527;4.0028,2.7348,-.8473;2.3774,4.9925,-.369;1.8066,3.8525,-.8842;1.7515,5.8678,-.1688;2.0875,1.6135,-1.6794;3.1255,.3561,.2139;1.7104,.3849,-.6419;.6076,.7354,.2878;1.6578,-.855,-1.5065;1.094,-2.4735,-1.3228;2.0282,-5.5032,-6.2661;1.76,-5.0662,-5.2999;1.0572,-3.9194,-2.8468;1.727,-3.6854,-5.156;1.4702,-5.8902,-4.2095;1.1333,-5.3107,-2.9928;1.3846,-3.0802,-3.9363;1.9601,-3.0202,-5.9911;1.5204,-6.9782,-4.3003;.9454,-5.9417,-2.12;.6542,-3.3687,-1.6034;-.3445,-3.8506,-.8558;-.6873,-4.8538,-1.1224;-.3784,-3.5459,.5921;-.4036,-3.0661,3.3498;-.6798,-4.5803,1.4868;-.1093,-2.2673,1.0897;-.1187,-2.0296,2.4598;-.6832,-4.343,2.8602;-.8702,-5.5888,1.109;.0946,-1.428,.4239;.1058,-1.0205,2.816;-.8841,-5.1668,3.5502;-.3996,-2.8835,4.4284;1.3382,-1.7443,-3.9099;1.4688,-1.3359,-3.0084;.3362,3.7132,-1.043;-2.1332,-2.9874,-1.7093;-2.9179,-3.1594,-.5649;-3.1086,-2.2799,.3635;-3.8364,-.714,.6148;-4.6978,-.2467,-.9724;-2.5276,.4598,1.2045;-5.0802,-1.0508,1.9718;-3.402,-4.369,-.3234;-4.1154,-4.6029,.8816;-3.999,.0545,-1.7682;-5.3644,.6145,-.7849;-5.3172,-1.0787,-1.353;-1.6404,.5647,.5536;-2.1622,.1505,2.1992;-2.996,1.4559,1.3095;-5.5403,-.102,2.3029;-5.8936,-1.7172,1.6348;-4.5914,-1.5124,2.848;-5.0513,-4.0206,.8984;-3.5014,-4.3446,1.7585;-4.3464,-5.6767,.8815;4.2784,-2.1983,-.1801;4.1361,-3.2971,-1.0398;3.4949,-4.4569,-.621;3.0004,-4.5125,.6766;3.1484,-3.4527,1.5664;3.7809,-2.2957,1.1292;4.4911,-3.2264,-2.0712;3.3542,-5.2988,-1.2996;2.2656,-5.7019,1.1097;2.7436,-3.5336,2.5763;3.8746,-1.4474,1.8084;-.4936,4.0197,.0442;-1.8648,3.8092,-.0199;-2.4035,3.2907,-1.1924;-1.6128,3.0072,-2.3033;-.2421,3.2161,-2.2196;-.048,4.3821,.9738;-2.5135,4.0192,.8309;-3.8393,3.0053,-1.2497;-2.0728,2.614,-3.2106;.3914,2.9702,-3.0737;2.1742,-5.9125,2.2982;1.7716,-6.406,.2479;-4.3225,2.7318,-2.3272;-4.4668,3.0404,-.2077;6.6192,.1649,-2.0328;5.9446,1.4121,-1.8896;7.7974,.0947,-2.8264;8.274,1.2036,-3.4806;8.3118,-.8669,-2.9167;9.1777,1.1373,-4.0927;6.4468,2.5345,-2.6061;7.5797,2.433,-3.3773;5.9164,3.4871,-2.5457;7.9443,3.3088,-3.9215;4.5771,3.9032,-.2463;3.7584,5.0535,-.0485;5.9267,3.955,.2031;6.4437,5.0981,.7641;6.5566,3.0687,.1047;7.4836,5.1119,1.1028;4.326,6.2263,.5221;5.6411,6.2547,.9144;3.6882,7.1058,.6549;6.0662,7.1604,1.356;-2.3528,-3.9395,-2.8683;-2.5352,-4.9738,-2.5384;-3.2258,-3.6176,-3.4671;-1.4784,-3.9363,-3.5383;-1.6948,-1.6012,-2.0986;-2.4311,-1.1294,-2.7747;-1.5299,-.9359,-1.2367;-.7458,-1.6473,-2.6562;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928623349</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000791036331 0.000133635614 0.019870618424 0.005345997607</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057102637 -0.000021620 0.000070554 0.000188012 0.000306814 0.000371276 0.000406969 0.000527064 0.000668980 0.000821602 0.000959172 0.001019794 0.001181176 0.001285911 0.001421005 0.001506584 0.001655614 0.001804047 0.002009344 0.002309820 0.002546007 0.002743181 0.002947515 0.003164355 0.003558986 0.003707019 0.004033778 0.004582585 0.004841574 0.005022475 0.005163460 0.005332579 0.006088815 0.006432889 0.006536373 0.006922301 0.007159751 0.007500272 0.008185601 0.008719511 0.008862409 0.009561644 0.009873594 0.009953793 0.010992228 0.011188718 0.011898070 0.012577152 0.013381822 0.013795553 0.014053542 0.014627783 0.014951951 0.015458870 0.015890492 0.016616047 0.016822030 0.018590234 0.018995435 0.019435952 0.020288706 0.020440831 0.021566946 0.021857656 0.022491335 0.022787406 0.023496019 0.023832709 0.024518841 0.025898608 0.026639346 0.026906017 0.027214132 0.027540852 0.028325168 0.029073809 0.030930813 0.031544411 0.031962808 0.034103142 0.034681217 0.036037422 0.039053261 0.039535202 0.041984890 0.045417762 0.046139939 0.046787892 0.048889344 0.049695936 0.049912176 0.050835240 0.051539586 0.052189581 0.052288827 0.052413728 0.052982761 0.053622282 0.054925918 0.056110082 0.056438770 0.056729061 0.057017068 0.057248770 0.057763964 0.058604228 0.059250893 0.059723420 0.061368787 0.062116945 0.062912816 0.064245334 0.064572994 0.065074413 0.066020816 0.067511083 0.067946000 0.068994699 0.070533114 0.072140890 0.072600953 0.072938821 0.073007725 0.074740294 0.078749008 0.080873639 0.081776225 0.083352304 0.084542415 0.087661348 0.088976088 0.089423843 0.089848276 0.091319578 0.093336560 0.094581342 0.095497644 0.096242696 0.096862382 0.098515657 0.100170214 0.100703710 0.102754369 0.103926542 0.104330727 0.106611193 0.109183618 0.111013681 0.112289791 0.112855779 0.113849473 0.114774249 0.116978006 0.117233106 0.118647850 0.119257049 0.120599333 0.122320247 0.125148947 0.125856111 0.128544373 0.129016184 0.131009923 0.133756940 0.136465617 0.137737403 0.138622957 0.139650935 0.140554948 0.143516248 0.144665313 0.145932435 0.146808689 0.152010405 0.153625174 0.154238524 0.160780806 0.161083351 0.168561952 0.171465411 0.176053713 0.179111204 0.181635382 0.184494674 0.189110616 0.190137544 0.191857135 0.201316112 0.202228415 0.206291307 0.206967687 0.207267635 0.212383106 0.212581644 0.215632753 0.217050219 0.220448406 0.220973667 0.224609185 0.225114780 0.226996615 0.231876198 0.234591651 0.235923112 0.238577074 0.246405485 0.249024389 0.252358317 0.256565380 0.257224933 0.258283960 0.262585546 0.271580177 0.282925528 0.292031362 0.300043139 0.300172818 0.301071813 0.307141023 0.307789332 0.309853911 0.320065182 0.321363155 0.326461546 0.330645120 0.336659326 0.347770480 0.352026754 0.355653736 0.360869545 0.362064061 0.364152814 0.384574228 0.407210706 0.414488028 0.430282494 0.432184401 0.435289692 0.450940253 0.464693734 0.475642288 0.478846500 0.480439085 0.486661344 0.498901393 0.503953368 0.515232361 0.518074399 0.543843684 0.566942041 0.567717700 0.586611986 0.592183445 0.605878866 0.644277239 0.645527737 0.668036469 0.675680716 0.687373556 0.704019989 0.704364434 0.705516574 0.709788941 0.717261431 0.734182144 0.738030222 0.739768269 0.747592129 0.750836937 0.771615879 0.775988638 0.809024957 0.821849892 0.824114698 0.828943229 0.834303099 0.847919272 0.849534542 0.851409799 0.854604198 0.863408378 0.867473608 0.875929632 0.887542060 0.891136877 0.892477689 0.893610146 0.902133036 0.910338629 0.918076787 0.923496074 0.924605126 0.932019281 0.935778327 0.956104383 0.962952607 0.965242548 0.970110825 0.978134221 0.982604056 0.998653232 1.013011452 1.016238527 1.021921085 1.040209540 1.055122414 1.071246985 1.072716251 1.079500927 1.087391467 1.108526214 1.110431620 1.118127204 1.119144758 1.122633273 1.123969378 1.141890931 1.149323643 1.161762645 1.170193190 1.177296036 1.188134638 1.200769547 1.222059123 1.234168199 1.258206897 1.296488900 1.298331352 1.314743013 1.326481998 1.327542994 1.330252424 1.331430960 1.334797650 1.342450026 1.349190676 1.368318342 1.380011578 1.381339184 1.381870036 1.429604356 1.517138582 1.557997925 1.684805314 1.922984773</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">261</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91638799" y3="-0.9556336" z3="-0.6863195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59979193" y3="-1.95109246" z3="-1.55333525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08266759" y3="-0.99665214" z3="-1.41484092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77444884" y3="1.47695643" z3="-1.06614409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28556195" y3="0.31011699" z3="-0.50410772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65574813" y3="2.73832472" z3="-1.15601568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00476973" y3="2.73499874" z3="-0.84805043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37848077" y3="4.99383289" z3="-0.37596795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80853557" y3="3.85299662" z3="-0.88994475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75238898" y3="5.8694853" z3="-0.17856228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09065436" y3="1.61335539" z3="-1.6830338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12483064" y3="0.35683113" z3="0.21279847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71164296" y3="0.38494061" z3="-0.64572492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60693659" y3="0.73517451" z3="0.28186029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66106916" y3="-0.85514384" z3="-1.51014134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09273752" y3="-2.47227692" z3="-1.3257207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01833039" y3="-5.49721403" z3="-6.27317653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75166457" y3="-5.06098612" z3="-5.30628078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05246011" y3="-3.91593762" z3="-2.85132967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71837174" y3="-3.68028438" z3="-5.16151801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46396714" y3="-5.88567456" z3="-4.21592105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1288189" y3="-5.30708348" z3="-2.9981932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37775718" y3="-3.07604234" z3="-3.94081809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94979121" y3="-3.01447354" z3="-5.99652382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5142571" y3="-6.97351176" z3="-4.30773413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9422174" y3="-5.93873049" z3="-2.12558575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65061524" y3="-3.36515213" z3="-1.60754599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34641634" y3="-3.84818143" z3="-0.85764661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68924982" y3="-4.85166394" z3="-1.12335648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37773967" y3="-3.54309733" z3="0.59030515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39983283" y3="-3.06232749" z3="3.34813869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6788738" y3="-4.5766591" z3="1.48580928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10801834" y3="-2.26419486" z3="1.08698586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11564127" y3="-2.02615112" z3="2.457064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6816921" y3="-4.33803495" z3="2.85896111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86857552" y3="-5.586516" z3="1.10935182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09533593" y3="-1.42504468" z3="0.42067133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10992631" y3="-1.01700558" z3="2.812358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88255381" y3="-5.16140412" z3="3.5494944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39519516" y3="-2.87897641" z3="4.42657328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33041436" y3="-1.74023951" z3="-3.91326725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46452194" y3="-1.33308545" z3="-3.01165503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33851896" y3="3.71266653" z3="-1.05011558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13578268" y3="-2.98564691" z3="-1.7071518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91952274" y3="-3.16120121" z3="-0.56278203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11013113" y3="-2.28486572" z3="0.36842462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8378577" y3="-0.71884379" z3="0.62293125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70777132" y3="-0.25360764" z3="-0.96067116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52882332" y3="0.45835811" z3="1.20511859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07392013" y3="-1.05732674" z3="1.98687425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4013156" y3="-4.37252783" z3="-0.32372422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11478718" y3="-4.61008811" z3="0.88014155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01267665" y3="0.04214941" z3="-1.76199154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36988678" y3="0.61112162" z3="-0.77282047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33325941" y3="-1.08454652" z3="-1.33423639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64259282" y3="0.5619721" z3="0.55267887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1617622" y3="0.15359357" z3="2.20067717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99804289" y3="1.45461743" z3="1.30670206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53426475" y3="-0.10950643" z3="2.31980318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88780341" y3="-1.72568517" z3="1.65472032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57967657" y3="-1.51784379" z3="2.86084304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05174359" y3="-4.02956117" z3="0.89802491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50153536" y3="-4.3528694" z3="1.75742949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34395927" y3="-5.68392876" z3="0.87735393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27800721" y3="-2.19789379" z3="-0.17804106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13526316" y3="-3.29545994" z3="-1.03932634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49271631" y3="-4.45496069" z3="-0.62242522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99820957" y3="-4.51207463" z3="0.67512125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14638912" y3="-3.45338006" z3="1.5663192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77944583" y3="-2.29616031" z3="1.13075191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49062912" y3="-3.22350198" z3="-2.07051957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35091868" y3="-5.2953151" z3="-1.30245723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2627169" y3="-5.7014453" z3="1.10613701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74107909" y3="-3.53525333" z3="2.57591379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87251571" y3="-1.44797014" z3="1.81073013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49239179" y3="4.02024732" z3="0.0355009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86303389" y3="3.80733661" z3="-0.02912101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40040022" y3="3.2852929" z3="-1.20062992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60882463" y3="3.00134519" z3="-2.31066389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23872584" y3="3.21340315" z3="-2.22707941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04797955" y3="4.38508385" z3="0.96465191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51229773" y3="4.01750439" z3="0.82149303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83571464" y3="2.99680287" z3="-1.25773486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06762319" y3="2.60529138" z3="-3.21740937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39568951" y3="2.96682581" z3="-3.07986425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17131466" y3="-5.91410906" z3="2.29414932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76796656" y3="-6.40325472" z3="0.24299852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31774341" y3="2.71695995" z3="-2.33410418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46400155" y3="3.03603149" z3="-0.21641579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62443075" y3="0.16435337" z3="-2.02456243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94954164" y3="1.41164812" z3="-1.88401239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80536585" y3="0.09364466" z3="-2.81418566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28457973" y3="1.20216319" z3="-3.46694016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31987997" y3="-0.86820018" z3="-2.90253592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19046025" y3="1.13553821" z3="-4.07590028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45435133" y3="2.53364065" z3="-2.59936603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59001641" y3="2.43171321" z3="-3.36648226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92383157" y3="3.48621858" z3="-2.54153746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95670233" y3="3.30733299" z3="-3.90958974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57790465" y3="3.90419498" z3="-0.247391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75911856" y3="5.0551128" z3="-0.05340876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92631487" y3="3.95646811" z3="0.20553252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44240263" y3="5.10050913" z3="0.76526736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55582268" y3="3.06973396" z3="0.11133942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48119278" y3="5.11459357" z3="1.10692617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3258965" y3="6.22896935" z3="0.51568498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64024574" y3="6.25771743" z3="0.91073625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6881682" y3="7.1088188" z3="0.6448101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06466433" y3="7.16416423" z3="1.35122261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35511902" y3="-3.93511092" z3="-2.86820626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53690598" y3="-4.9700678" z3="-2.54064913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22832916" y3="-3.61208324" z3="-3.46600958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48094449" y3="-3.93076852" z3="-3.5384967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69908809" y3="-1.59857008" z3="-2.09342491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43635421" y3="-1.1263575" z3="-2.7675544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5345082" y3="-0.9347196" z3="-1.23015677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74982035" y3="-1.64230837" z3="-2.65126371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9164,-.9556,-.6863;6.5998,-1.9511,-1.5533;6.0827,-.9967,-1.4148;4.7744,1.477,-1.0661;4.2856,.3101,-.5041;2.6557,2.7383,-1.156;4.0048,2.735,-.8481;2.3785,4.9938,-.376;1.8085,3.853,-.8899;1.7524,5.8695,-.1786;2.0907,1.6134,-1.683;3.1248,.3568,.2128;1.7116,.3849,-.6457;.6069,.7352,.2819;1.6611,-.8551,-1.5101;1.0927,-2.4723,-1.3257;2.0183,-5.4972,-6.2732;1.7517,-5.061,-5.3063;1.0525,-3.9159,-2.8513;1.7184,-3.6803,-5.1615;1.464,-5.8857,-4.2159;1.1288,-5.3071,-2.9982;1.3778,-3.076,-3.9408;1.9498,-3.0145,-5.9965;1.5143,-6.9735,-4.3077;.9422,-5.9387,-2.1256;.6506,-3.3652,-1.6075;-.3464,-3.8482,-.8576;-.6892,-4.8517,-1.1234;-.3777,-3.5431,.5903;-.3998,-3.0623,3.3481;-.6789,-4.5767,1.4858;-.108,-2.2642,1.087;-.1156,-2.0262,2.4571;-.6817,-4.338,2.859;-.8686,-5.5865,1.1094;.0953,-1.425,.4207;.1099,-1.017,2.8124;-.8826,-5.1614,3.5495;-.3952,-2.879,4.4266;1.3304,-1.7402,-3.9133;1.4645,-1.3331,-3.0117;.3385,3.7127,-1.0501;-2.1358,-2.9856,-1.7072;-2.9195,-3.1612,-.5628;-3.1101,-2.2849,.3684;-3.8379,-.7188,.6229;-4.7078,-.2536,-.9607;-2.5288,.4584,1.2051;-5.0739,-1.0573,1.9869;-3.4013,-4.3725,-.3237;-4.1148,-4.6101,.8801;-4.0127,.0421,-1.762;-5.3699,.6111,-.7728;-5.3333,-1.0845,-1.3342;-1.6426,.562,.5527;-2.1618,.1536,2.2007;-2.998,1.4546,1.3067;-5.5343,-.1095,2.3198;-5.8878,-1.7257,1.6547;-4.5797,-1.5178,2.8608;-5.0517,-4.0296,.898;-3.5015,-4.3529,1.7574;-4.344,-5.6839,.8774;4.278,-2.1979,-.178;4.1353,-3.2955,-1.0393;3.4927,-4.455,-.6224;2.9982,-4.5121,.6751;3.1464,-3.4534,1.5663;3.7794,-2.2962,1.1308;4.4906,-3.2235,-2.0705;3.3509,-5.2953,-1.3025;2.2627,-5.7014,1.1061;2.7411,-3.5353,2.5759;3.8725,-1.448,1.8107;-.4924,4.0202,.0355;-1.863,3.8073,-.0291;-2.4004,3.2853,-1.2006;-1.6088,3.0013,-2.3107;-.2387,3.2134,-2.2271;-.048,4.3851,.9647;-2.5123,4.0175,.8215;-3.8357,2.9968,-1.2577;-2.0676,2.6053,-3.2174;.3957,2.9668,-3.0799;2.1713,-5.9141,2.2941;1.768,-6.4033,.243;-4.3177,2.717,-2.3341;-4.464,3.036,-.2164;6.6244,.1644,-2.0246;5.9495,1.4116,-1.884;7.8054,.0936,-2.8142;8.2846,1.2022,-3.4669;8.3199,-.8682,-2.9025;9.1905,1.1355,-4.0759;6.4544,2.5336,-2.5994;7.59,2.4317,-3.3665;5.9238,3.4862,-2.5415;7.9567,3.3073,-3.9096;4.5779,3.9042,-.2474;3.7591,5.0551,-.0534;5.9263,3.9565,.2055;6.4424,5.1005,.7653;6.5558,3.0697,.1113;7.4812,5.1146,1.1069;4.3259,6.229,.5157;5.6402,6.2577,.9107;3.6882,7.1088,.6448;6.0647,7.1642,1.3512;-2.3551,-3.9351,-2.8682;-2.5369,-4.9701,-2.5406;-3.2283,-3.6121,-3.466;-1.4809,-3.9308,-3.5385;-1.6991,-1.5986,-2.0934;-2.4364,-1.1264,-2.7676;-1.5345,-.9347,-1.2302;-.7498,-1.6423,-2.6513;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930071127</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000609378849 0.000106843084 0.021932537026 0.005307562213</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057104063 -0.000068299 0.000090828 0.000152506 0.000322638 0.000372413 0.000405437 0.000527269 0.000668733 0.000817548 0.000960563 0.001022483 0.001183312 0.001285351 0.001420867 0.001507440 0.001656078 0.001800171 0.002006256 0.002303979 0.002547124 0.002711115 0.002962310 0.003078444 0.003558362 0.003703009 0.003999229 0.004580251 0.004833704 0.005016052 0.005162963 0.005334598 0.006083191 0.006428670 0.006533152 0.006920576 0.007159055 0.007484566 0.008183992 0.008719465 0.008861160 0.009559028 0.009870753 0.009942832 0.010989716 0.011186135 0.011896538 0.012577120 0.013380335 0.013790938 0.014039499 0.014627276 0.014944897 0.015457163 0.015889967 0.016601113 0.016762781 0.018588284 0.019011731 0.019436236 0.020291199 0.020442927 0.021563037 0.021855008 0.022491731 0.022786520 0.023495455 0.023835812 0.024518739 0.025898406 0.026636291 0.026909558 0.027211104 0.027538807 0.028325688 0.029072690 0.030930735 0.031543434 0.031897210 0.034102735 0.034685663 0.036037038 0.039053959 0.039534646 0.041985278 0.045418561 0.046140594 0.046785390 0.048889426 0.049695908 0.049912554 0.050835323 0.051540164 0.052189542 0.052288919 0.052413855 0.052983099 0.053621708 0.054928042 0.056110195 0.056438790 0.056729616 0.057017153 0.057249108 0.057765990 0.058604175 0.059252763 0.059723992 0.061367893 0.062117120 0.062910972 0.064251225 0.064572905 0.065076347 0.066019218 0.067511194 0.067944765 0.068994877 0.070531020 0.072137545 0.072585248 0.072923302 0.072982829 0.074605793 0.078745356 0.080871215 0.081795146 0.083350310 0.084542735 0.087522099 0.088976984 0.089424504 0.089845609 0.091320839 0.093336376 0.094581311 0.095497800 0.096244268 0.096863403 0.098516202 0.100172008 0.100703817 0.102754329 0.103928836 0.104333131 0.106620321 0.109183018 0.111014968 0.112289744 0.112855949 0.113858058 0.114774911 0.116977973 0.117240986 0.118648696 0.119249177 0.120601332 0.122319184 0.125144771 0.125855177 0.128544563 0.129016063 0.131010082 0.133757423 0.136470936 0.137738297 0.138622685 0.139650618 0.140550140 0.143516313 0.144666359 0.145932140 0.146808381 0.152009295 0.153623865 0.154230709 0.160744910 0.161005229 0.168560871 0.171465063 0.176053493 0.179110456 0.181633741 0.184498433 0.189110112 0.190148424 0.191857065 0.201318058 0.202229161 0.206291292 0.206967654 0.207267802 0.212383543 0.212581776 0.215632846 0.217044119 0.220444843 0.220971888 0.224606583 0.225116587 0.226998886 0.231877430 0.234591702 0.235925446 0.238578390 0.246399941 0.248983261 0.252371218 0.256565014 0.257224490 0.258283852 0.262585296 0.271580284 0.282925399 0.292032629 0.300043922 0.300172489 0.301073956 0.307141894 0.307790077 0.309853951 0.320055096 0.321363851 0.326461700 0.330641603 0.336664245 0.347770074 0.352026831 0.355653714 0.360857364 0.362064965 0.364152834 0.384574181 0.407210668 0.414487086 0.430282296 0.432158484 0.435292081 0.450941202 0.464694984 0.475639041 0.478848039 0.480439518 0.486651982 0.498901511 0.503949918 0.515233288 0.518070596 0.543846069 0.566941557 0.567717970 0.586613263 0.592173341 0.605878275 0.644270099 0.645527677 0.668036534 0.675677073 0.687372558 0.704021767 0.704362946 0.705395300 0.709784574 0.717261758 0.734184736 0.738030649 0.739765882 0.747569118 0.750838710 0.771615895 0.775988747 0.809026667 0.821850323 0.824118152 0.828943003 0.834303051 0.847932643 0.849533120 0.851410106 0.854604637 0.863409797 0.867473605 0.875929794 0.887548124 0.891136004 0.892473910 0.893611810 0.902132906 0.910340116 0.918074198 0.923401255 0.924598198 0.932019527 0.935777277 0.956103534 0.962942541 0.965242750 0.970107377 0.978057549 0.982601244 0.998653505 1.013008328 1.016237853 1.021921169 1.040209581 1.055122491 1.071248912 1.072719895 1.079502180 1.087392837 1.108525889 1.110432026 1.118132927 1.119147052 1.122633339 1.123969928 1.141890938 1.149345837 1.161762645 1.170193821 1.177296357 1.188154991 1.200770223 1.222058561 1.234170422 1.258207895 1.296489022 1.298339169 1.314743054 1.326482253 1.327542424 1.330249481 1.331435252 1.334797270 1.342449543 1.349188029 1.368327741 1.380011469 1.381339156 1.381870010 1.429607728 1.517011650 1.557997092 1.684805483 1.922970136</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">262</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91800783" y3="-0.95513392" z3="-0.68260405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60356068" y3="-1.95093418" z3="-1.5448946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08617298" y3="-0.99641823" z3="-1.40795887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77695357" y3="1.47742605" z3="-1.06328268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28692175" y3="0.3107016" z3="-0.50187214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65837822" y3="2.73858515" z3="-1.15839234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00674611" y3="2.73570892" z3="-0.84771038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37941159" y3="4.99521503" z3="-0.38256981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81049262" y3="3.85346599" z3="-0.89579435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75287324" y3="5.87119481" z3="-0.18763264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09463237" y3="1.6130106" z3="-1.68540286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12490634" y3="0.35736747" z3="0.21292549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71306973" y3="0.38559676" z3="-0.64802048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60692427" y3="0.73694478" z3="0.27736265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66346045" y3="-0.8548158" z3="-1.5121545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09226617" y3="-2.47044958" z3="-1.327662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00610624" y3="-5.49277118" z3="-6.27918295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74217091" y3="-5.05713786" z3="-5.31126407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04965095" y3="-3.91363898" z3="-2.8536859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70845596" y3="-3.67644218" z3="-5.16586514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45844733" y3="-5.88257119" z3="-4.22028404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12659608" y3="-5.30470544" z3="-3.00130662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37123212" y3="-3.07297328" z3="-3.94381972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93687753" y3="-3.0101057" z3="-6.00141089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50923858" y3="-6.97041208" z3="-4.31260568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9428122" y3="-5.93674753" z3="-2.12824123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65030649" y3="-3.36440565" z3="-1.60839444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34740649" y3="-3.84633229" z3="-0.85931036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69063906" y3="-4.84946918" z3="-1.12556041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.378217" y3="-3.54216733" z3="0.58895082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40208752" y3="-3.06169251" z3="3.34656963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68069908" y3="-4.57587274" z3="1.48378157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10719307" y3="-2.26381638" z3="1.08636294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11611196" y3="-2.02566908" z3="2.4563161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68360423" y3="-4.33813625" z3="2.85709944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87294936" y3="-5.58385392" z3="1.10597519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0974424" y3="-1.42470948" z3="0.42054449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11008495" y3="-1.01693205" z3="2.81244163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8852763" y3="-5.16161535" z3="3.54736574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39793786" y3="-2.87866567" z3="4.42505121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32310263" y3="-1.73707053" z3="-3.91551322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46083933" y3="-1.33056615" z3="-3.01414433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34069213" y3="3.7118496" z3="-1.05755606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13633701" y3="-2.98241339" z3="-1.70673084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91967128" y3="-3.1608396" z3="-0.56216459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10968745" y3="-2.28665413" z3="0.37118799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83837704" y3="-0.72260543" z3="0.63098296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71852369" y3="-0.26080018" z3="-0.9474839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52885575" y3="0.45870832" z3="1.20483545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06413315" y3="-1.06391517" z3="2.00289563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40193019" y3="-4.37233452" z3="-0.32634173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11471383" y3="-4.61320098" z3="0.87777648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02805873" y3="0.02842019" z3="-1.75508963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37546995" y3="0.60744708" z3="-0.7583032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34963733" y3="-1.09124562" z3="-1.3125845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64511462" y3="0.56171718" z3="0.54892384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15754573" y3="0.15778534" z3="2.20001806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99935228" y3="1.45422388" z3="1.30522587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52599119" y3="-0.11744154" z3="2.33810455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87742766" y3="-1.73574079" z3="1.67665286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56241928" y3="-1.52133068" z3="2.87398391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05256443" y3="-4.03410094" z3="0.89644893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50153022" y3="-4.35603938" z3="1.75561993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34223762" y3="-5.68776196" z3="0.87360419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27785899" y3="-2.19728067" z3="-0.17636893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13423932" y3="-3.29328739" z3="-1.03937018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49063977" y3="-4.45301157" z3="-0.62433836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99568754" y3="-4.51151173" z3="0.67297226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14448999" y3="-3.45427932" z3="1.56570835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77867969" y3="-2.29696319" z3="1.13201347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49033323" y3="-3.22016199" z3="-2.07022976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34878069" y3="-5.29272735" z3="-1.30549181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25985559" y3="-5.70147822" z3="1.1025203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73872727" y3="-3.53736957" z3="2.57501547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87289943" y3="-1.4503897" z3="1.81340446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49187323" y3="4.02148579" z3="0.02648733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86205692" y3="3.8059445" z3="-0.03852889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39720383" y3="3.27912301" z3="-1.2089931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60404173" y3="2.99316284" z3="-2.31747549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23428069" y3="3.20747955" z3="-2.23285892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04889775" y3="4.3897882" z3="0.9550905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.512713" y3="4.01798035" z3="0.81025412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8317605" y3="2.98731513" z3="-1.26652416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06116814" y3="2.59320986" z3="-3.22332123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40129691" y3="2.95938871" z3="-3.08463894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16817912" y3="-5.91543452" z3="2.29037136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76539952" y3="-6.40269546" z3="0.23866017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31146029" y3="2.69993269" z3="-2.34199724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46183165" y3="3.03162905" z3="-0.22645358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62946553" y3="0.16444384" z3="-2.01656348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95388532" y3="1.41164315" z3="-1.87858297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81262488" y3="0.09354846" z3="-2.8027623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29322293" y3="1.20164213" z3="-3.45518911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3277782" y3="-0.86811139" z3="-2.8887018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20088123" y3="1.13489962" z3="-4.06143032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46007275" y3="2.53306529" z3="-2.59385904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59776552" y3="2.4308643" z3="-3.3579442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9290102" y3="3.48545848" z3="-2.53844461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96541734" y3="3.30602976" z3="-3.90110681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57862564" y3="3.90590781" z3="-0.2477869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75937982" y3="5.05712774" z3="-0.05741216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92636495" y3="3.95903786" z3="0.20720548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44149949" y3="5.10413931" z3="0.76570189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55631174" y3="3.07207469" z3="0.11480396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47993502" y3="5.11888358" z3="1.10874918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32515028" y3="6.23207753" z3="0.5105569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63886089" y3="6.26161171" z3="0.90780255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68714607" y3="7.11228493" z3="0.63711343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0625154" y3="7.16896947" z3="1.34720494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35685831" y3="-3.92914209" z3="-2.86993712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53639735" y3="-4.96548367" z3="-2.54511666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23193284" y3="-3.60574936" z3="-3.46499946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48398039" y3="-3.92088729" z3="-3.54182254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.7007197" y3="-1.59379801" z3="-2.09056438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43858361" y3="-1.12008951" z3="-2.76340652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53548661" y3="-0.93192543" z3="-1.22607463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75220388" y3="-1.63641816" z3="-2.64959225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.918,-.9551,-.6826;6.6036,-1.9509,-1.5449;6.0862,-.9964,-1.408;4.777,1.4774,-1.0633;4.2869,.3107,-.5019;2.6584,2.7386,-1.1584;4.0067,2.7357,-.8477;2.3794,4.9952,-.3826;1.8105,3.8535,-.8958;1.7529,5.8712,-.1876;2.0946,1.613,-1.6854;3.1249,.3574,.2129;1.7131,.3856,-.648;.6069,.7369,.2774;1.6635,-.8548,-1.5122;1.0923,-2.4704,-1.3277;2.0061,-5.4928,-6.2792;1.7422,-5.0571,-5.3113;1.0497,-3.9136,-2.8537;1.7085,-3.6764,-5.1659;1.4584,-5.8826,-4.2203;1.1266,-5.3047,-3.0013;1.3712,-3.073,-3.9438;1.9369,-3.0101,-6.0014;1.5092,-6.9704,-4.3126;.9428,-5.9367,-2.1282;.6503,-3.3644,-1.6084;-.3474,-3.8463,-.8593;-.6906,-4.8495,-1.1256;-.3782,-3.5422,.589;-.4021,-3.0617,3.3466;-.6807,-4.5759,1.4838;-.1072,-2.2638,1.0864;-.1161,-2.0257,2.4563;-.6836,-4.3381,2.8571;-.8729,-5.5839,1.106;.0974,-1.4247,.4205;.1101,-1.0169,2.8124;-.8853,-5.1616,3.5474;-.3979,-2.8787,4.4251;1.3231,-1.7371,-3.9155;1.4608,-1.3306,-3.0141;.3407,3.7118,-1.0576;-2.1363,-2.9824,-1.7067;-2.9197,-3.1608,-.5622;-3.1097,-2.2867,.3712;-3.8384,-.7226,.631;-4.7185,-.2608,-.9475;-2.5289,.4587,1.2048;-5.0641,-1.0639,2.0029;-3.4019,-4.3723,-.3263;-4.1147,-4.6132,.8778;-4.0281,.0284,-1.7551;-5.3755,.6074,-.7583;-5.3496,-1.0912,-1.3126;-1.6451,.5617,.5489;-2.1575,.1578,2.2;-2.9994,1.4542,1.3052;-5.526,-.1174,2.3381;-5.8774,-1.7357,1.6767;-4.5624,-1.5213,2.874;-5.0526,-4.0341,.8964;-3.5015,-4.356,1.7556;-4.3422,-5.6878,.8736;4.2779,-2.1973,-.1764;4.1342,-3.2933,-1.0394;3.4906,-4.453,-.6243;2.9957,-4.5115,.673;3.1445,-3.4543,1.5657;3.7787,-2.297,1.132;4.4903,-3.2202,-2.0702;3.3488,-5.2927,-1.3055;2.2599,-5.7015,1.1025;2.7387,-3.5374,2.575;3.8729,-1.4504,1.8134;-.4919,4.0215,.0265;-1.8621,3.8059,-.0385;-2.3972,3.2791,-1.209;-1.604,2.9932,-2.3175;-.2343,3.2075,-2.2329;-.0489,4.3898,.9551;-2.5127,4.018,.8103;-3.8318,2.9873,-1.2665;-2.0612,2.5932,-3.2233;.4013,2.9594,-3.0846;2.1682,-5.9154,2.2904;1.7654,-6.4027,.2387;-4.3115,2.6999,-2.342;-4.4618,3.0316,-.2265;6.6295,.1644,-2.0166;5.9539,1.4116,-1.8786;7.8126,.0935,-2.8028;8.2932,1.2016,-3.4552;8.3278,-.8681,-2.8887;9.2009,1.1349,-4.0614;6.4601,2.5331,-2.5939;7.5978,2.4309,-3.3579;5.929,3.4855,-2.5384;7.9654,3.306,-3.9011;4.5786,3.9059,-.2478;3.7594,5.0571,-.0574;5.9264,3.959,.2072;6.4415,5.1041,.7657;6.5563,3.0721,.1148;7.4799,5.1189,1.1087;4.3252,6.2321,.5106;5.6389,6.2616,.9078;3.6871,7.1123,.6371;6.0625,7.169,1.3472;-2.3569,-3.9291,-2.8699;-2.5364,-4.9655,-2.5451;-3.2319,-3.6057,-3.465;-1.484,-3.9209,-3.5418;-1.7007,-1.5938,-2.0906;-2.4386,-1.1201,-2.7634;-1.5355,-.9319,-1.2261;-.7522,-1.6364,-2.6496;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929231128</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000710326579 0.000119704491 0.016990023610 0.005303059501</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057105476 -0.000264229 0.000060742 0.000154434 0.000279711 0.000354681 0.000403868 0.000524298 0.000669338 0.000817427 0.000970208 0.001026297 0.001193748 0.001283892 0.001423477 0.001508623 0.001668666 0.001795051 0.002005235 0.002303779 0.002552371 0.002686419 0.002966356 0.003051946 0.003552150 0.003689216 0.003991193 0.004577643 0.004824711 0.005015679 0.005170339 0.005340915 0.006082718 0.006422422 0.006523069 0.006919485 0.007143941 0.007466097 0.008183981 0.008719350 0.008859803 0.009554957 0.009858856 0.009938852 0.010989174 0.011185742 0.011897746 0.012578851 0.013379266 0.013790759 0.014024807 0.014627821 0.014947558 0.015457858 0.015891661 0.016608069 0.016743418 0.018589401 0.019042767 0.019435696 0.020294356 0.020455345 0.021563123 0.021840086 0.022493908 0.022786671 0.023495254 0.023828492 0.024518813 0.025899988 0.026646072 0.026910093 0.027208761 0.027539764 0.028325506 0.029069164 0.030933992 0.031548290 0.031879625 0.034105180 0.034694187 0.036037389 0.039055021 0.039536708 0.041986082 0.045420387 0.046141852 0.046786664 0.048890762 0.049695965 0.049915861 0.050835536 0.051541270 0.052189491 0.052288979 0.052414026 0.052987205 0.053622512 0.054935429 0.056110307 0.056439609 0.056729621 0.057017312 0.057243143 0.057771244 0.058604418 0.059253835 0.059728956 0.061365852 0.062118736 0.062910296 0.064257630 0.064573163 0.065080696 0.066019905 0.067511189 0.067945424 0.068996020 0.070531427 0.072123329 0.072568281 0.072916630 0.072985456 0.074597234 0.078747760 0.080871197 0.081812740 0.083351059 0.084540594 0.087494631 0.088979999 0.089424818 0.089845412 0.091321324 0.093336829 0.094581517 0.095497872 0.096252961 0.096863811 0.098516232 0.100172903 0.100704233 0.102754809 0.103932476 0.104342020 0.106630468 0.109187610 0.111017906 0.112289981 0.112857237 0.113863362 0.114776452 0.116978382 0.117261279 0.118649624 0.119244425 0.120607754 0.122319825 0.125140948 0.125856088 0.128544949 0.129015330 0.131014169 0.133759526 0.136479693 0.137739921 0.138623330 0.139649989 0.140552371 0.143515433 0.144662949 0.145932477 0.146808305 0.152006173 0.153623242 0.154227204 0.160736391 0.160987462 0.168562688 0.171465280 0.176054205 0.179110882 0.181634728 0.184499701 0.189114858 0.190161341 0.191861818 0.201320964 0.202231040 0.206291462 0.206967559 0.207268077 0.212384108 0.212581736 0.215633418 0.217038979 0.220456716 0.220971493 0.224602744 0.225120671 0.227009640 0.231879446 0.234592321 0.235932918 0.238579120 0.246399149 0.248980679 0.252387486 0.256565013 0.257224862 0.258284335 0.262585363 0.271580366 0.282925555 0.292034067 0.300043784 0.300171888 0.301074408 0.307142547 0.307790812 0.309853944 0.320059801 0.321364760 0.326462081 0.330650288 0.336665720 0.347769650 0.352027070 0.355653810 0.360860756 0.362069791 0.364153174 0.384574503 0.407211814 0.414485250 0.430281863 0.432162576 0.435298384 0.450944243 0.464697154 0.475639047 0.478850113 0.480440226 0.486653307 0.498901725 0.503951346 0.515234082 0.518070565 0.543847117 0.566941699 0.567718742 0.586616037 0.592174038 0.605880638 0.644271969 0.645528546 0.668037664 0.675677138 0.687373141 0.704025871 0.704362797 0.705383470 0.709807774 0.717262384 0.734187231 0.738031030 0.739765919 0.747560961 0.750839862 0.771615976 0.775988920 0.809030311 0.821850464 0.824120239 0.828942973 0.834303046 0.847945663 0.849533745 0.851410070 0.854605230 0.863412680 0.867473632 0.875930924 0.887551911 0.891136165 0.892471742 0.893615373 0.902132688 0.910339729 0.918073262 0.923378602 0.924596800 0.932019640 0.935777297 0.956106690 0.962944550 0.965244148 0.970107074 0.978059339 0.982601348 0.998653878 1.013008147 1.016239649 1.021921261 1.040209640 1.055122717 1.071251436 1.072727028 1.079502962 1.087393686 1.108526361 1.110432401 1.118140326 1.119151225 1.122633477 1.123971016 1.141891014 1.149364686 1.161762698 1.170194285 1.177297050 1.188173830 1.200770569 1.222061300 1.234171186 1.258208442 1.296489011 1.298343809 1.314743353 1.326482458 1.327542164 1.330248345 1.331435770 1.334797386 1.342450179 1.349190080 1.368347661 1.380011628 1.381339273 1.381870474 1.429607942 1.517013412 1.557997097 1.684805916 1.922968699</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">263</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91709807" y3="-0.95562575" z3="-0.68261383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6043435" y3="-1.95126925" z3="-1.54170755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08712183" y3="-0.99662087" z3="-1.404993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77786502" y3="1.47726464" z3="-1.06119461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28591899" y3="0.3101614" z3="-0.50224319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65953127" y3="2.73827006" z3="-1.16230345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00700765" y3="2.73531252" z3="-0.84754607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37850235" y3="4.99513774" z3="-0.38765115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8108475" y3="3.8532256" z3="-0.90187948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75152598" y3="5.87129208" z3="-0.19466569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09712221" y3="1.61279889" z3="-1.69108886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12201295" y3="0.35639879" z3="0.20955645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71247144" y3="0.38529306" z3="-0.65484559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60420689" y3="0.73711855" z3="0.26790324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66450744" y3="-0.85506061" z3="-1.51901018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09037709" y3="-2.46986397" z3="-1.33232437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99566119" y3="-5.49222831" z3="-6.28508594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73294599" y3="-5.05632065" z3="-5.31695149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04348458" y3="-3.91223905" z3="-2.85885005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69896671" y3="-3.6756259" z3="-5.17186926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45097329" y3="-5.88139017" z3="-4.2254714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12054464" y3="-5.30327833" z3="-3.00617017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36329574" y3="-3.0719416" z3="-3.94957884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9259955" y3="-3.00950294" z3="-6.00777691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50198472" y3="-6.96917542" z3="-4.31768806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93801532" y3="-5.93521277" z3="-2.13299248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6458295" y3="-3.36160033" z3="-1.61362054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34894082" y3="-3.84491969" z3="-0.86042712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6926042" y3="-4.84848126" z3="-1.1250024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37544232" y3="-3.53976242" z3="0.58766661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38888326" y3="-3.05927216" z3="3.34588269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67267286" y3="-4.5735183" z3="1.48443341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10526838" y3="-2.26075651" z3="1.08340432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10849881" y3="-2.02295993" z3="2.45358226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6714328" y3="-4.33481253" z3="2.85759216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86151138" y3="-5.58475823" z3="1.10938187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09501917" y3="-1.42137553" z3="0.41627105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11729835" y3="-1.01353665" z3="2.80797795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86960321" y3="-5.15830458" z3="3.54856789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38094784" y3="-2.87597987" z3="4.42431721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31460918" y3="-1.73615348" z3="-3.92114287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45516881" y3="-1.32999475" z3="-3.02007945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34139461" y3="3.71125071" z3="-1.06606465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.14040268" y3="-2.98180128" z3="-1.70293632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92051426" y3="-3.16066507" z3="-0.55643692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10847021" y3="-2.28731626" z3="0.37797125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83721989" y3="-0.72235076" z3="0.63635022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72043219" y3="-0.26277591" z3="-0.94141883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52737694" y3="0.46009343" z3="1.20613242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06142546" y3="-1.06194221" z3="2.01050144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40052205" y3="-4.3729403" z3="-0.31881998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11064208" y3="-4.61363327" z3="0.88622826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03169325" y3="0.02415241" z3="-1.75141011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37590483" y3="0.60693436" z3="-0.75308146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35389832" y3="-1.09295677" z3="-1.30298843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64124743" y3="0.5578603" z3="0.55264378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16028939" y3="0.1647458" z3="2.2044853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99635635" y3="1.45750877" z3="1.29839817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52339475" y3="-0.11514958" z3="2.34351332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8747014" y3="-1.73507354" z3="1.6866628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55926336" y3="-1.51750759" z3="2.8824516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04843995" y3="-4.03480709" z3="0.90743157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49610765" y3="-4.35699495" z3="1.76239695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33790696" y3="-5.68756856" z3="0.88190095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27604409" y3="-2.19824304" z3="-0.17853896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13274853" y3="-3.29320567" z3="-1.04301579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48963505" y3="-4.45368341" z3="-0.62941457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99576853" y3="-4.51458554" z3="0.66823935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14363785" y3="-3.45812529" z3="1.56214381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77653586" y3="-2.29952075" z3="1.12957761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48857685" y3="-3.21830265" z3="-2.0738293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34727379" y3="-5.29200428" z3="-1.31179362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26144772" y3="-5.70568177" z3="1.09664382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73805666" y3="-3.54276959" z3="2.57141587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86927158" y3="-1.45279108" z3="1.81157404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49292284" y3="4.02459017" z3="0.01541857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86299129" y3="3.80821238" z3="-0.05102258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39637663" y3="3.27653742" z3="-1.22001869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60148766" y3="2.98707007" z3="-2.32619138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23213719" y3="3.20328003" z3="-2.24129292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05173038" y3="4.39678858" z3="0.94312022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5145702" y3="4.02238992" z3="0.79708388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83074392" y3="2.98342742" z3="-1.27772754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05712175" y3="2.58335304" z3="-3.23119867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4049387" y3="2.95203216" z3="-3.09075833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17147241" y3="-5.92174825" z3="2.2841415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76618815" y3="-6.40545959" z3="0.23208855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31006299" y3="2.69474323" z3="-2.35297895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46106908" y3="3.0283296" z3="-0.23789922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63285657" y3="0.16480283" z3="-2.01034114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95749328" y3="1.41219009" z3="-1.87262151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81856964" y3="0.09441512" z3="-2.79274681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30219635" y3="1.20341984" z3="-3.44143387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33333953" y3="-0.86754047" z3="-2.8787043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21192281" y3="1.13712855" z3="-4.04463959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46685956" y3="2.53459609" z3="-2.58417515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60725338" y3="2.43306036" z3="-3.34426311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93631831" y3="3.48735406" z3="-2.52886398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97748827" y3="3.30912642" z3="-3.88428261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57707448" y3="3.90539086" z3="-0.24557211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75752153" y3="5.05687192" z3="-0.0582873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92287784" y3="3.95820856" z3="0.21491846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43608602" y3="5.10318718" z3="0.77553487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55261018" y3="3.07117843" z3="0.1259128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47284403" y3="5.11766745" z3="1.12321281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32144256" y3="6.23176218" z3="0.51167034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63348539" y3="6.26094518" z3="0.91418829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68324061" y3="7.11205453" z3="0.63550492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0556368" y3="7.1681549" z3="1.35544414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36288176" y3="-3.9288087" z3="-2.86544438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54220416" y3="-4.9648732" z3="-2.53962373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23867888" y3="-3.60533427" z3="-3.45928812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49115673" y3="-3.92185255" z3="-3.53889972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70520171" y3="-1.59397091" z3="-2.08764381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44319146" y3="-1.12166044" z3="-2.76102778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54096471" y3="-0.93086796" z3="-1.22376932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7561885" y3="-1.63636681" z3="-2.64623871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9171,-.9556,-.6826;6.6043,-1.9513,-1.5417;6.0871,-.9966,-1.405;4.7779,1.4773,-1.0612;4.2859,.3102,-.5022;2.6595,2.7383,-1.1623;4.007,2.7353,-.8475;2.3785,4.9951,-.3877;1.8108,3.8532,-.9019;1.7515,5.8713,-.1947;2.0971,1.6128,-1.6911;3.122,.3564,.2096;1.7125,.3853,-.6548;.6042,.7371,.2679;1.6645,-.8551,-1.519;1.0904,-2.4699,-1.3323;1.9957,-5.4922,-6.2851;1.7329,-5.0563,-5.317;1.0435,-3.9122,-2.8589;1.699,-3.6756,-5.1719;1.451,-5.8814,-4.2255;1.1205,-5.3033,-3.0062;1.3633,-3.0719,-3.9496;1.926,-3.0095,-6.0078;1.502,-6.9692,-4.3177;.938,-5.9352,-2.133;.6458,-3.3616,-1.6136;-.3489,-3.8449,-.8604;-.6926,-4.8485,-1.125;-.3754,-3.5398,.5877;-.3889,-3.0593,3.3459;-.6727,-4.5735,1.4844;-.1053,-2.2608,1.0834;-.1085,-2.023,2.4536;-.6714,-4.3348,2.8576;-.8615,-5.5848,1.1094;.095,-1.4214,.4163;.1173,-1.0135,2.808;-.8696,-5.1583,3.5486;-.3809,-2.876,4.4243;1.3146,-1.7362,-3.9211;1.4552,-1.33,-3.0201;.3414,3.7113,-1.0661;-2.1404,-2.9818,-1.7029;-2.9205,-3.1607,-.5564;-3.1085,-2.2873,.378;-3.8372,-.7224,.6364;-4.7204,-.2628,-.9414;-2.5274,.4601,1.2061;-5.0614,-1.0619,2.0105;-3.4005,-4.3729,-.3188;-4.1106,-4.6136,.8862;-4.0317,.0242,-1.7514;-5.3759,.6069,-.7531;-5.3539,-1.093,-1.303;-1.6412,.5579,.5526;-2.1603,.1647,2.2045;-2.9964,1.4575,1.2984;-5.5234,-.1151,2.3435;-5.8747,-1.7351,1.6867;-4.5593,-1.5175,2.8825;-5.0484,-4.0348,.9074;-3.4961,-4.357,1.7624;-4.3379,-5.6876,.8819;4.276,-2.1982,-.1785;4.1327,-3.2932,-1.043;3.4896,-4.4537,-.6294;2.9958,-4.5146,.6682;3.1436,-3.4581,1.5621;3.7765,-2.2995,1.1296;4.4886,-3.2183,-2.0738;3.3473,-5.292,-1.3118;2.2614,-5.7057,1.0966;2.7381,-3.5428,2.5714;3.8693,-1.4528,1.8116;-.4929,4.0246,.0154;-1.863,3.8082,-.051;-2.3964,3.2765,-1.22;-1.6015,2.9871,-2.3262;-.2321,3.2033,-2.2413;-.0517,4.3968,.9431;-2.5146,4.0224,.7971;-3.8307,2.9834,-1.2777;-2.0571,2.5834,-3.2312;.4049,2.952,-3.0908;2.1715,-5.9217,2.2841;1.7662,-6.4055,.2321;-4.3101,2.6947,-2.353;-4.4611,3.0283,-.2379;6.6329,.1648,-2.0103;5.9575,1.4122,-1.8726;7.8186,.0944,-2.7927;8.3022,1.2034,-3.4414;8.3333,-.8675,-2.8787;9.2119,1.1371,-4.0446;6.4669,2.5346,-2.5842;7.6073,2.4331,-3.3443;5.9363,3.4874,-2.5289;7.9775,3.3091,-3.8843;4.5771,3.9054,-.2456;3.7575,5.0569,-.0583;5.9229,3.9582,.2149;6.4361,5.1032,.7755;6.5526,3.0712,.1259;7.4728,5.1177,1.1232;4.3214,6.2318,.5117;5.6335,6.2609,.9142;3.6832,7.1121,.6355;6.0556,7.1682,1.3554;-2.3629,-3.9288,-2.8654;-2.5422,-4.9649,-2.5396;-3.2387,-3.6053,-3.4593;-1.4912,-3.9219,-3.5389;-1.7052,-1.594,-2.0876;-2.4432,-1.1217,-2.761;-1.541,-.9309,-1.2238;-.7562,-1.6364,-2.6462;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662923656366</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001179063671 0.000198181278 0.018530510941 0.005359385947</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057108018 -0.000196892 0.000088220 0.000168596 0.000280025 0.000359780 0.000404637 0.000524039 0.000669793 0.000817865 0.000973559 0.001033332 0.001197992 0.001283950 0.001423643 0.001515727 0.001685296 0.001794920 0.002008862 0.002305075 0.002557966 0.002686100 0.002968707 0.003054824 0.003552944 0.003689014 0.003992488 0.004579662 0.004830559 0.005017048 0.005172935 0.005350243 0.006082779 0.006426173 0.006524098 0.006919411 0.007145504 0.007466364 0.008184054 0.008719524 0.008859958 0.009555684 0.009859584 0.009939282 0.010990059 0.011185690 0.011898729 0.012581094 0.013380600 0.013793393 0.014027640 0.014628091 0.014947625 0.015458031 0.015891804 0.016611846 0.016743510 0.018592342 0.019091535 0.019435967 0.020295454 0.020470359 0.021563098 0.021839882 0.022494928 0.022787142 0.023495309 0.023831407 0.024518977 0.025900625 0.026649323 0.026918278 0.027209766 0.027539709 0.028327937 0.029070483 0.030937366 0.031550411 0.031882036 0.034107728 0.034704655 0.036037537 0.039056302 0.039539259 0.041987091 0.045421177 0.046143396 0.046787269 0.048892210 0.049696279 0.049925145 0.050836483 0.051542657 0.052189786 0.052289076 0.052414111 0.052987214 0.053622562 0.054943743 0.056110306 0.056440138 0.056729777 0.057017310 0.057243642 0.057776837 0.058606219 0.059254600 0.059734811 0.061365928 0.062120162 0.062913359 0.064270384 0.064574076 0.065086810 0.066021021 0.067513464 0.067945897 0.068996073 0.070532942 0.072123949 0.072568602 0.072916886 0.072990345 0.074602910 0.078748293 0.080872068 0.081841203 0.083352309 0.084544117 0.087496144 0.088983518 0.089425258 0.089845439 0.091322828 0.093337352 0.094581491 0.095497891 0.096259132 0.096864027 0.098517315 0.100173310 0.100704420 0.102754783 0.103938343 0.104371097 0.106643509 0.109192039 0.111017917 0.112290027 0.112857332 0.113877054 0.114781477 0.116980366 0.117289897 0.118651231 0.119249925 0.120617180 0.122320066 0.125141126 0.125857143 0.128545965 0.129017146 0.131021994 0.133766194 0.136490996 0.137744956 0.138623123 0.139650009 0.140556125 0.143516159 0.144665553 0.145933676 0.146808587 0.152006437 0.153624988 0.154227105 0.160738646 0.160987666 0.168564312 0.171465354 0.176054368 0.179110940 0.181636679 0.184502323 0.189118893 0.190179457 0.191874640 0.201327710 0.202232796 0.206291838 0.206967613 0.207268471 0.212384112 0.212581902 0.215633497 0.217038848 0.220469125 0.220971881 0.224603461 0.225126841 0.227026550 0.231882593 0.234592429 0.235933394 0.238579723 0.246399067 0.248980596 0.252408967 0.256565062 0.257225458 0.258285820 0.262585381 0.271580752 0.282925560 0.292035558 0.300048777 0.300172150 0.301075716 0.307142982 0.307792084 0.309855065 0.320060843 0.321366178 0.326462379 0.330676350 0.336672006 0.347770338 0.352029173 0.355654176 0.360876793 0.362070827 0.364153391 0.384575500 0.407211857 0.414486881 0.430281945 0.432166604 0.435314795 0.450956320 0.464702657 0.475644889 0.478855980 0.480440277 0.486659793 0.498902317 0.503959145 0.515234261 0.518073040 0.543848470 0.566941680 0.567720915 0.586628093 0.592174094 0.605880968 0.644278671 0.645528592 0.668042724 0.675677765 0.687376480 0.704036366 0.704362797 0.705425411 0.709922909 0.717264441 0.734200999 0.738031677 0.739771350 0.747570865 0.750841802 0.771616068 0.775989150 0.809046763 0.821850665 0.824130339 0.828942986 0.834303044 0.847967356 0.849538403 0.851410116 0.854609356 0.863424811 0.867473648 0.875932751 0.887560308 0.891138651 0.892481956 0.893627096 0.902132719 0.910342942 0.918073668 0.923379099 0.924596841 0.932019942 0.935777605 0.956111908 0.962944933 0.965252818 0.970108239 0.978061289 0.982601384 0.998655413 1.013008309 1.016250000 1.021921368 1.040209924 1.055122750 1.071264022 1.072782057 1.079506716 1.087397157 1.108529459 1.110434107 1.118172474 1.119169246 1.122633977 1.123973636 1.141891316 1.149449024 1.161763299 1.170196260 1.177297235 1.188238433 1.200772057 1.222071624 1.234171265 1.258209484 1.296489377 1.298359652 1.314744660 1.326483457 1.327544326 1.330248723 1.331435725 1.334798615 1.342450328 1.349190262 1.368420936 1.380011765 1.381339399 1.381873967 1.429617425 1.517013822 1.557997428 1.684809752 1.922970655</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">264</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92055818" y3="-0.95594458" z3="-0.68043614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60989352" y3="-1.94973229" z3="-1.53743387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09175687" y3="-0.99556924" z3="-1.40087329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77960485" y3="1.47705094" z3="-1.05782874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28799176" y3="0.30915822" z3="-0.50029671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66015424" y3="2.73614122" z3="-1.1626553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00695208" y3="2.73436179" z3="-0.84502487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37569004" y3="4.99308663" z3="-0.39009709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80989509" y3="3.850482" z3="-0.90503766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74790039" y3="5.86908275" z3="-0.19993488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10025649" y3="1.61001889" z3="-1.69259511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12283485" y3="0.35370888" z3="0.20958694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7148868" y3="0.38186124" z3="-0.65746387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60462017" y3="0.7326126" z3="0.26327257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66961322" y3="-0.8580629" z3="-1.52250962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09206642" y3="-2.47120478" z3="-1.33399936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.97728676" y3="-5.49163895" z3="-6.29203191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71887264" y3="-5.05614264" z3="-5.32256596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04032349" y3="-3.91301276" z3="-2.86092012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68596905" y3="-3.67547063" z3="-5.17686278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44151822" y3="-5.8816935" z3="-4.23001441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11661145" y3="-5.30403678" z3="-3.00904592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35572712" y3="-3.07223398" z3="-3.95284076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9096014" y3="-3.00902419" z3="-6.013644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49179813" y3="-6.96949121" z3="-4.32279501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93766595" y3="-5.93612408" z3="-2.13495192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64703048" y3="-3.36409856" z3="-1.61343394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34854232" y3="-3.84484388" z3="-0.86092529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69428895" y3="-4.84721034" z3="-1.12668954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37360843" y3="-3.54164418" z3="0.58768754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38826468" y3="-3.06214113" z3="3.34535857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67177534" y3="-4.5760125" z3="1.48288667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10234917" y3="-2.26302712" z3="1.08470775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10703118" y3="-2.0252449" z3="2.45471854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66966167" y3="-4.33901637" z3="2.8563696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86543834" y3="-5.58298574" z3="1.10466264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09872817" y3="-1.42324931" z3="0.41875008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11906262" y3="-1.01649262" z3="2.81081482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.86746838" y3="-5.16316477" z3="3.5471033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38044802" y3="-2.87953831" z3="4.42389931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30756891" y3="-1.73628784" z3="-3.92404165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45239173" y3="-1.33059641" z3="-3.02338729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34095543" y3="3.70763355" z3="-1.0729055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13995183" y3="-2.97790913" z3="-1.70044924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91901134" y3="-3.15716065" z3="-0.55313849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10594598" y3="-2.28340858" z3="0.38149125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83472483" y3="-0.71943094" z3="0.64167452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72447004" y3="-0.263774" z3="-0.9331186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52443275" y3="0.4664246" z3="1.20489717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05250742" y3="-1.05831732" z3="2.02121716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40026279" y3="-4.36889504" z3="-0.31651719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10782851" y3="-4.6111451" z3="0.8904384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03871009" y3="0.0170245" z3="-1.74755401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37619058" y3="0.60863911" z3="-0.74519245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.36164252" y3="-1.09397624" z3="-1.28812963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63968187" y3="0.56214685" z3="0.54926002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15488766" y3="0.17553924" z3="2.20375214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99415852" y3="1.46323346" z3="1.29482192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51658196" y3="-0.11159417" z3="2.35275703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86463591" y3="-1.73515081" z3="1.70248055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54559566" y3="-1.50854674" z3="2.8928903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04662748" y3="-4.03346373" z3="0.91281933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4912887" y3="-4.35297928" z3="1.76587989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33372259" y3="-5.68625255" z3="0.88722639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27907716" y3="-2.19916785" z3="-0.1784969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13427776" y3="-3.29207523" z3="-1.04525112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4901771" y3="-4.45272036" z3="-0.63382424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99672299" y3="-4.51548876" z3="0.66390636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1461723" y3="-3.46121589" z3="1.56001201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78022791" y3="-2.30264283" z3="1.129645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48999034" y3="-3.21548208" z3="-2.07599547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34710234" y3="-5.2899992" z3="-1.31775774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26214069" y3="-5.70716135" z3="1.09047019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74106944" y3="-3.54758245" z3="2.56932846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87497954" y3="-1.45813874" z3="1.81359208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49688947" y3="4.02823242" z3="0.00387053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86644233" y3="3.81058937" z3="-0.06485557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39592745" y3="3.27119534" z3="-1.23222459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59776314" y3="2.97506628" z3="-2.33459369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22851526" y3="3.19108424" z3="-2.245762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05856712" y3="4.40634745" z3="0.93090416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52112669" y3="4.0307829" z3="0.77859724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82983014" y3="2.97692252" z3="-1.29241418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05039217" y3="2.56526322" z3="-3.23837223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41151402" y3="2.93350165" z3="-3.09133391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1728989" y3="-5.92555069" z3="2.27771499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76624796" y3="-6.40529549" z3="0.22500259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30612956" y3="2.68287456" z3="-2.36742806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46271137" y3="3.02612767" z3="-0.2542603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63744167" y3="0.16673184" z3="-2.00460041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96062475" y3="1.41335588" z3="-1.86748844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82457093" y3="0.09785115" z3="-2.78494731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30825607" y3="1.20749061" z3="-3.4324214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34044149" y3="-0.86346588" z3="-2.87027686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21910953" y3="1.14235862" z3="-4.03401517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47007509" y3="2.53635424" z3="-2.57795758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61185449" y3="2.43620818" z3="-3.33618613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93840834" y3="3.48839817" z3="-2.52365566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98207976" y3="3.31269043" z3="-3.87544273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57464865" y3="3.90500077" z3="-0.24200482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75372764" y3="5.05591647" z3="-0.05711379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91964573" y3="3.95889778" z3="0.22100231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43088385" y3="5.1044425" z3="0.78214195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55047707" y3="3.07212298" z3="0.13247552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46721933" y3="5.11977243" z3="1.13155594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31563694" y3="6.23144873" z3="0.51346062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62692726" y3="6.2616607" z3="0.91870413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67654148" y3="7.11145334" z3="0.63551963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04756162" y3="7.16940509" z3="1.36014703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36552089" y3="-3.92322881" z3="-2.86385528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5451935" y3="-4.95958282" z3="-2.53975922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24221884" y3="-3.59811806" z3="-3.45552571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49498047" y3="-3.91535009" z3="-3.53873946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70488413" y3="-1.5892204" z3="-2.08478565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44337175" y3="-1.11590815" z3="-2.75700685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5386075" y3="-0.92687152" z3="-1.22097165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75704607" y3="-1.63188005" z3="-2.64484816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9206,-.9559,-.6804;6.6099,-1.9497,-1.5374;6.0918,-.9956,-1.4009;4.7796,1.4771,-1.0578;4.288,.3092,-.5003;2.6602,2.7361,-1.1627;4.007,2.7344,-.845;2.3757,4.9931,-.3901;1.8099,3.8505,-.905;1.7479,5.8691,-.1999;2.1003,1.61,-1.6926;3.1228,.3537,.2096;1.7149,.3819,-.6575;.6046,.7326,.2633;1.6696,-.8581,-1.5225;1.0921,-2.4712,-1.334;1.9773,-5.4916,-6.292;1.7189,-5.0561,-5.3226;1.0403,-3.913,-2.8609;1.686,-3.6755,-5.1769;1.4415,-5.8817,-4.23;1.1166,-5.304,-3.009;1.3557,-3.0722,-3.9528;1.9096,-3.009,-6.0136;1.4918,-6.9695,-4.3228;.9377,-5.9361,-2.135;.647,-3.3641,-1.6134;-.3485,-3.8448,-.8609;-.6943,-4.8472,-1.1267;-.3736,-3.5416,.5877;-.3883,-3.0621,3.3454;-.6718,-4.576,1.4829;-.1023,-2.263,1.0847;-.107,-2.0252,2.4547;-.6697,-4.339,2.8564;-.8654,-5.583,1.1047;.0987,-1.4232,.4188;.1191,-1.0165,2.8108;-.8675,-5.1632,3.5471;-.3804,-2.8795,4.4239;1.3076,-1.7363,-3.924;1.4524,-1.3306,-3.0234;.341,3.7076,-1.0729;-2.14,-2.9779,-1.7004;-2.919,-3.1572,-.5531;-3.1059,-2.2834,.3815;-3.8347,-.7194,.6417;-4.7245,-.2638,-.9331;-2.5244,.4664,1.2049;-5.0525,-1.0583,2.0212;-3.4003,-4.3689,-.3165;-4.1078,-4.6111,.8904;-4.0387,.017,-1.7476;-5.3762,.6086,-.7452;-5.3616,-1.094,-1.2881;-1.6397,.5621,.5493;-2.1549,.1755,2.2038;-2.9942,1.4632,1.2948;-5.5166,-.1116,2.3528;-5.8646,-1.7352,1.7025;-4.5456,-1.5085,2.8929;-5.0466,-4.0335,.9128;-3.4913,-4.353,1.7659;-4.3337,-5.6863,.8872;4.2791,-2.1992,-.1785;4.1343,-3.2921,-1.0453;3.4902,-4.4527,-.6338;2.9967,-4.5155,.6639;3.1462,-3.4612,1.56;3.7802,-2.3026,1.1296;4.49,-3.2155,-2.076;3.3471,-5.29,-1.3178;2.2621,-5.7072,1.0905;2.7411,-3.5476,2.5693;3.875,-1.4581,1.8136;-.4969,4.0282,.0039;-1.8664,3.8106,-.0649;-2.3959,3.2712,-1.2322;-1.5978,2.9751,-2.3346;-.2285,3.1911,-2.2458;-.0586,4.4063,.9309;-2.5211,4.0308,.7786;-3.8298,2.9769,-1.2924;-2.0504,2.5653,-3.2384;.4115,2.9335,-3.0913;2.1729,-5.9256,2.2777;1.7662,-6.4053,.225;-4.3061,2.6829,-2.3674;-4.4627,3.0261,-.2543;6.6374,.1667,-2.0046;5.9606,1.4134,-1.8675;7.8246,.0979,-2.7849;8.3083,1.2075,-3.4324;8.3404,-.8635,-2.8703;9.2191,1.1424,-4.034;6.4701,2.5364,-2.578;7.6119,2.4362,-3.3362;5.9384,3.4884,-2.5237;7.9821,3.3127,-3.8754;4.5746,3.905,-.242;3.7537,5.0559,-.0571;5.9196,3.9589,.221;6.4309,5.1044,.7821;6.5505,3.0721,.1325;7.4672,5.1198,1.1316;4.3156,6.2314,.5135;5.6269,6.2617,.9187;3.6765,7.1115,.6355;6.0476,7.1694,1.3601;-2.3655,-3.9232,-2.8639;-2.5452,-4.9596,-2.5398;-3.2422,-3.5981,-3.4555;-1.495,-3.9154,-3.5387;-1.7049,-1.5892,-2.0848;-2.4434,-1.1159,-2.757;-1.5386,-.9269,-1.221;-.757,-1.6319,-2.6448;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662922299492</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001294564208 0.000186815339 0.020873638140 0.005332929712</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057111838 -0.000281795 0.000109522 0.000152783 0.000279860 0.000358061 0.000404666 0.000524039 0.000670017 0.000817618 0.000972202 0.001035155 0.001197001 0.001283907 0.001423723 0.001518636 0.001698922 0.001795988 0.002010746 0.002306914 0.002556500 0.002686910 0.002968862 0.003053169 0.003553137 0.003688869 0.003992110 0.004583055 0.004837362 0.005018514 0.005175735 0.005360009 0.006082785 0.006433600 0.006528082 0.006919349 0.007146580 0.007467144 0.008184198 0.008720788 0.008860250 0.009557876 0.009859795 0.009939281 0.010991586 0.011185751 0.011900899 0.012586241 0.013382481 0.013797092 0.014031820 0.014628318 0.014947814 0.015458288 0.015891882 0.016613637 0.016743756 0.018597342 0.019149755 0.019436097 0.020296424 0.020496161 0.021563073 0.021839797 0.022496493 0.022789312 0.023495327 0.023833020 0.024519437 0.025901182 0.026653995 0.026927031 0.027211282 0.027539809 0.028332794 0.029072565 0.030941257 0.031551652 0.031884642 0.034114060 0.034715216 0.036037659 0.039056860 0.039540961 0.041987762 0.045421258 0.046144621 0.046790441 0.048893749 0.049696988 0.049939935 0.050839011 0.051543975 0.052190398 0.052289135 0.052414170 0.052987296 0.053622634 0.054954992 0.056110400 0.056440819 0.056729772 0.057017412 0.057244145 0.057781431 0.058610562 0.059255102 0.059742332 0.061366037 0.062123228 0.062916253 0.064284233 0.064575707 0.065093034 0.066026629 0.067519305 0.067945965 0.068996112 0.070533571 0.072125141 0.072569697 0.072916980 0.072992040 0.074607528 0.078750045 0.080873027 0.081866310 0.083354467 0.084547719 0.087495370 0.088988638 0.089425564 0.089845501 0.091324219 0.093338042 0.094581594 0.095498194 0.096266815 0.096864057 0.098519374 0.100173669 0.100704703 0.102754783 0.103944953 0.104411874 0.106658124 0.109196477 0.111018219 0.112291042 0.112858377 0.113891501 0.114790252 0.116982965 0.117317602 0.118652866 0.119259301 0.120630162 0.122320360 0.125141465 0.125858904 0.128548015 0.129020717 0.131032748 0.133774015 0.136499595 0.137751367 0.138623244 0.139650307 0.140559326 0.143516514 0.144665818 0.145934984 0.146808894 0.152007413 0.153627130 0.154227266 0.160740409 0.160992208 0.168568313 0.171465607 0.176055019 0.179111235 0.181637291 0.184505165 0.189123966 0.190198081 0.191896098 0.201335163 0.202234693 0.206292007 0.206967637 0.207268678 0.212384613 0.212582846 0.215633884 0.217038900 0.220473766 0.220972747 0.224604180 0.225132567 0.227047810 0.231885328 0.234592644 0.235933468 0.238579760 0.246399330 0.248982246 0.252426598 0.256565306 0.257225998 0.258289252 0.262585391 0.271581173 0.282925592 0.292035824 0.300055295 0.300172899 0.301076479 0.307143293 0.307792988 0.309855660 0.320061894 0.321366519 0.326462721 0.330707134 0.336675578 0.347770887 0.352030729 0.355654605 0.360899138 0.362071299 0.364153734 0.384576599 0.407212219 0.414486937 0.430281935 0.432171422 0.435336040 0.450975426 0.464708791 0.475654036 0.478860533 0.480441041 0.486667488 0.498902839 0.503964687 0.515234687 0.518076568 0.543848497 0.566941690 0.567723168 0.586644411 0.592174467 0.605881072 0.644285186 0.645528612 0.668050412 0.675677864 0.687383397 0.704046454 0.704362815 0.705462257 0.710081663 0.717266184 0.734219566 0.738032110 0.739774027 0.747577427 0.750842576 0.771616079 0.775989310 0.809067621 0.821850708 0.824137400 0.828943190 0.834303096 0.847983952 0.849538985 0.851410427 0.854613768 0.863437184 0.867473646 0.875934414 0.887562689 0.891142339 0.892487287 0.893634990 0.902132771 0.910343912 0.918073996 0.923386237 0.924597365 0.932020046 0.935778105 0.956120487 0.962951805 0.965264460 0.970108595 0.978062831 0.982601447 0.998656299 1.013010775 1.016261189 1.021922521 1.040210971 1.055122753 1.071273058 1.072845644 1.079518026 1.087400073 1.108534489 1.110435594 1.118200761 1.119189030 1.122634711 1.123976531 1.141891846 1.149526252 1.161764486 1.170197069 1.177297253 1.188291413 1.200772794 1.222080778 1.234172191 1.258210530 1.296489536 1.298364199 1.314745371 1.326483872 1.327544998 1.330249050 1.331436770 1.334800549 1.342452366 1.349190334 1.368482184 1.380011819 1.381339837 1.381876858 1.429620368 1.517016453 1.557998260 1.684813364 1.922972621</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">265</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92548912" y3="-0.95519545" z3="-0.67761978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61566681" y3="-1.94789029" z3="-1.53422667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09703729" y3="-0.99399416" z3="-1.39751053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78285021" y3="1.47765935" z3="-1.05492803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29194785" y3="0.30941965" z3="-0.49752184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6620913" y3="2.73351619" z3="-1.16322001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00843868" y3="2.73398868" z3="-0.84392612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37341094" y3="4.99061891" z3="-0.3926083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80981265" y3="3.84683761" z3="-0.90733558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7441483" y3="5.86607198" z3="-0.20336093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10456454" y3="1.60616335" z3="-1.69296815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12614393" y3="0.35293507" z3="0.21141458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71912923" y3="0.37857266" z3="-0.65716312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60734516" y3="0.72932124" z3="0.26172137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67623962" y3="-0.86218735" z3="-1.5210056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09304503" y3="-2.47355041" z3="-1.33326929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.96497009" y3="-5.49205764" z3="-6.29574186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.70952903" y3="-5.05648479" z3="-5.32547972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03698233" y3="-3.9132269" z3="-2.86232517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.67954216" y3="-3.6757892" z3="-5.17892995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43294232" y3="-5.8819971" z3="-4.23291769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1109447" y3="-5.30430552" z3="-3.01110801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3527326" y3="-3.07261497" z3="-3.95399086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90275048" y3="-3.00940939" z3="-6.01571873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.48136196" y3="-6.96983579" z3="-4.3263698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93212741" y3="-5.93644806" z3="-2.13727228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64469601" y3="-3.36335621" z3="-1.61499125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35164845" y3="-3.84393954" z3="-0.86208468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6990266" y3="-4.84575747" z3="-1.12867274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37575734" y3="-3.54305426" z3="0.58708909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38887641" y3="-3.07209068" z3="3.34711756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67597805" y3="-4.57908153" z3="1.4803639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10179984" y3="-2.26662002" z3="1.0873703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.10527753" y3="-2.03356734" z3="2.4584076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67456992" y3="-4.34519331" z3="2.85429522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86735496" y3="-5.58886639" z3="1.10194681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10063496" y3="-1.4250096" z3="0.423532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.12287889" y3="-1.02596595" z3="2.81673765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8753276" y3="-5.1705355" z3="3.54221755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38116991" y3="-2.89234062" z3="4.42612501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3073834" y3="-1.73667252" z3="-3.92346474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4552804" y3="-1.33290651" z3="-3.02258126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34135822" y3="3.7022834" z3="-1.07735794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1395567" y3="-2.97232655" z3="-1.69974333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91944859" y3="-3.15263754" z3="-0.55311499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10320253" y3="-2.28218269" z3="0.38475094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83252049" y3="-0.71822519" z3="0.64688635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73122631" y3="-0.26716081" z3="-0.92452476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52094526" y3="0.47052924" z3="1.20033018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04123272" y3="-1.05644455" z3="2.03496881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40349281" y3="-4.36404491" z3="-0.31953921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11374813" y3="-4.60659202" z3="0.88517052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04933074" y3="0.00598473" z3="-1.74517304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37725228" y3="0.60990815" z3="-0.73760843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37506377" y3="-1.0958437" z3="-1.27064955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64075088" y3="0.56809124" z3="0.53912874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14369944" y3="0.18126317" z3="2.19656431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99196535" y3="1.46696578" z3="1.29201096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5037013" y3="-0.11007493" z3="2.36856259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85500349" y3="-1.73471886" z3="1.72335419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52750205" y3="-1.50548602" z3="2.9036047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04972712" y3="-4.02512626" z3="0.90854575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49825411" y3="-4.35462541" z3="1.76196555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34420477" y3="-5.67978078" z3="0.87732933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28363814" y3="-2.19866319" z3="-0.17675736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13617334" y3="-3.28992878" z3="-1.04507727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49033033" y3="-4.45011924" z3="-0.63483457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9983597" y3="-4.51439132" z3="0.66341504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15058501" y3="-3.46171476" z3="1.56101001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78589939" y3="-2.30324173" z3="1.13166293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49082618" y3="-3.21199671" z3="-2.07606632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34449484" y3="-5.28563718" z3="-1.32005638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26201987" y3="-5.70541587" z3="1.08896661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74657162" y3="-3.54913383" z3="2.57064993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88217125" y3="-1.45933189" z3="1.81657024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49934103" y3="4.02887413" z3="-0.00453091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8689922" y3="3.81157199" z3="-0.07630437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39551735" y3="3.26516034" z3="-1.24168017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59417118" y3="2.9618646" z3="-2.33941655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22542063" y3="3.17931057" z3="-2.24932216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06392359" y3="4.41286007" z3="0.92109223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5254953" y3="4.03606183" z3="0.76537039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82923892" y3="2.97046937" z3="-1.30358631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04433209" y3="2.54626412" z3="-3.24175346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41695461" y3="2.9164153" z3="-3.09142652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1720367" y3="-5.92434567" z3="2.27593202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76554776" y3="-6.40241086" z3="0.22290128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30264873" y3="2.66878418" z3="-2.37795649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46504592" y3="3.02734604" z3="-0.2676388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64214545" y3="0.16882375" z3="-2.00086048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96426942" y3="1.41495037" z3="-1.86394003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82937548" y3="0.10094772" z3="-2.78115457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31190008" y3="1.210933" z3="-3.42894126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34619512" y3="-0.85992422" z3="-2.86636896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22271974" y3="1.14649037" z3="-4.03067805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47265141" y3="2.5383967" z3="-2.57448235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61438957" y3="2.43913198" z3="-3.33286031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94011729" y3="3.49006731" z3="-2.52002015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98364367" y3="3.31586827" z3="-3.87239458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57384803" y3="3.90588933" z3="-0.24137505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75099864" y3="5.05566535" z3="-0.05818873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91811567" y3="3.96226329" z3="0.22306816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42679446" y3="5.10894805" z3="0.78423021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55026966" y3="3.07661235" z3="0.13627127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46245722" y3="5.12627289" z3="1.13502931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31030279" y3="6.2323964" z3="0.51245438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62090662" y3="6.26492694" z3="0.91930876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6696618" y3="7.11141609" z3="0.63337587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03946276" y3="7.17350939" z3="1.36109794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36702489" y3="-3.91428399" z3="-2.86556501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54740003" y3="-4.95150446" z3="-2.54334299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24378159" y3="-3.58666637" z3="-3.4556912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49701729" y3="-3.90610061" z3="-3.54121434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70070654" y3="-1.58420212" z3="-2.08024808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43808964" y3="-1.10700423" z3="-2.75109704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53300956" y3="-0.92474918" z3="-1.21439158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75287399" y3="-1.6279751" z3="-2.64071107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9255,-.9552,-.6776;6.6157,-1.9479,-1.5342;6.097,-.994,-1.3975;4.7829,1.4777,-1.0549;4.2919,.3094,-.4975;2.6621,2.7335,-1.1632;4.0084,2.734,-.8439;2.3734,4.9906,-.3926;1.8098,3.8468,-.9073;1.7441,5.8661,-.2034;2.1046,1.6062,-1.693;3.1261,.3529,.2114;1.7191,.3786,-.6572;.6073,.7293,.2617;1.6762,-.8622,-1.521;1.093,-2.4736,-1.3333;1.965,-5.4921,-6.2957;1.7095,-5.0565,-5.3255;1.037,-3.9132,-2.8623;1.6795,-3.6758,-5.1789;1.4329,-5.882,-4.2329;1.1109,-5.3043,-3.0111;1.3527,-3.0726,-3.954;1.9028,-3.0094,-6.0157;1.4814,-6.9698,-4.3264;.9321,-5.9364,-2.1373;.6447,-3.3634,-1.615;-.3516,-3.8439,-.8621;-.699,-4.8458,-1.1287;-.3758,-3.5431,.5871;-.3889,-3.0721,3.3471;-.676,-4.5791,1.4804;-.1018,-2.2666,1.0874;-.1053,-2.0336,2.4584;-.6746,-4.3452,2.8543;-.8674,-5.5889,1.1019;.1006,-1.425,.4235;.1229,-1.026,2.8167;-.8753,-5.1705,3.5422;-.3812,-2.8923,4.4261;1.3074,-1.7367,-3.9235;1.4553,-1.3329,-3.0226;.3414,3.7023,-1.0774;-2.1396,-2.9723,-1.6997;-2.9194,-3.1526,-.5531;-3.1032,-2.2822,.3848;-3.8325,-.7182,.6469;-4.7312,-.2672,-.9245;-2.5209,.4705,1.2003;-5.0412,-1.0564,2.035;-3.4035,-4.364,-.3195;-4.1137,-4.6066,.8852;-4.0493,.006,-1.7452;-5.3773,.6099,-.7376;-5.3751,-1.0958,-1.2706;-1.6408,.5681,.5391;-2.1437,.1813,2.1966;-2.992,1.467,1.292;-5.5037,-.1101,2.3686;-5.855,-1.7347,1.7234;-4.5275,-1.5055,2.9036;-5.0497,-4.0251,.9085;-3.4983,-4.3546,1.762;-4.3442,-5.6798,.8773;4.2836,-2.1987,-.1768;4.1362,-3.2899,-1.0451;3.4903,-4.4501,-.6348;2.9984,-4.5144,.6634;3.1506,-3.4617,1.561;3.7859,-2.3032,1.1317;4.4908,-3.212,-2.0761;3.3445,-5.2856,-1.3201;2.262,-5.7054,1.089;2.7466,-3.5491,2.5706;3.8822,-1.4593,1.8166;-.4993,4.0289,-.0045;-1.869,3.8116,-.0763;-2.3955,3.2652,-1.2417;-1.5942,2.9619,-2.3394;-.2254,3.1793,-2.2493;-.0639,4.4129,.9211;-2.5255,4.0361,.7654;-3.8292,2.9705,-1.3036;-2.0443,2.5463,-3.2418;.417,2.9164,-3.0914;2.172,-5.9243,2.2759;1.7655,-6.4024,.2229;-4.3026,2.6688,-2.378;-4.465,3.0273,-.2676;6.6421,.1688,-2.0009;5.9643,1.415,-1.8639;7.8294,.1009,-2.7812;8.3119,1.2109,-3.4289;8.3462,-.8599,-2.8664;9.2227,1.1465,-4.0307;6.4727,2.5384,-2.5745;7.6144,2.4391,-3.3329;5.9401,3.4901,-2.52;7.9836,3.3159,-3.8724;4.5738,3.9059,-.2414;3.751,5.0557,-.0582;5.9181,3.9623,.2231;6.4268,5.1089,.7842;6.5503,3.0766,.1363;7.4625,5.1263,1.135;4.3103,6.2324,.5125;5.6209,6.2649,.9193;3.6697,7.1114,.6334;6.0395,7.1735,1.3611;-2.367,-3.9143,-2.8656;-2.5474,-4.9515,-2.5433;-3.2438,-3.5867,-3.4557;-1.497,-3.9061,-3.5412;-1.7007,-1.5842,-2.0802;-2.4381,-1.107,-2.7511;-1.533,-.9247,-1.2144;-.7529,-1.628,-2.6407;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662919500006</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001552176832 0.000204512914 0.023090022436 0.005335534639</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057114731 -0.000223987 0.000094885 0.000176166 0.000281949 0.000361418 0.000404949 0.000523382 0.000670013 0.000817651 0.000971741 0.001035055 0.001197784 0.001285278 0.001423731 0.001520196 0.001705981 0.001795677 0.002012109 0.002307835 0.002556251 0.002685815 0.002969960 0.003053297 0.003554494 0.003689276 0.003992204 0.004582255 0.004837118 0.005023736 0.005182512 0.005363710 0.006082986 0.006437290 0.006528682 0.006919218 0.007146672 0.007467258 0.008184664 0.008727414 0.008861132 0.009564629 0.009859816 0.009939339 0.010993060 0.011186344 0.011902877 0.012591926 0.013382647 0.013800692 0.014037587 0.014628581 0.014948024 0.015459193 0.015891936 0.016614811 0.016743183 0.018607232 0.019212963 0.019436577 0.020296994 0.020521303 0.021563173 0.021839882 0.022496190 0.022789771 0.023496407 0.023833625 0.024520240 0.025901510 0.026657959 0.026934045 0.027211878 0.027539987 0.028337199 0.029074787 0.030943478 0.031552203 0.031888513 0.034123712 0.034725746 0.036038430 0.039057159 0.039543795 0.041987713 0.045421326 0.046145017 0.046793288 0.048893757 0.049698626 0.049962287 0.050841052 0.051545023 0.052191243 0.052289148 0.052414191 0.052987945 0.053622658 0.054969175 0.056110453 0.056441837 0.056729807 0.057017440 0.057245767 0.057787314 0.058614283 0.059256210 0.059753180 0.061367016 0.062125662 0.062923003 0.064298182 0.064576055 0.065097878 0.066033934 0.067530111 0.067946490 0.068996159 0.070535074 0.072125329 0.072570389 0.072917661 0.072993885 0.074610164 0.078753030 0.080874791 0.081888309 0.083356211 0.084552078 0.087495826 0.088994375 0.089425809 0.089845564 0.091324943 0.093338785 0.094581701 0.095498550 0.096275319 0.096864123 0.098522775 0.100174311 0.100705464 0.102754815 0.103949506 0.104448200 0.106679868 0.109198166 0.111020337 0.112293639 0.112860130 0.113909317 0.114796958 0.116987383 0.117346980 0.118653290 0.119268328 0.120643363 0.122321314 0.125142336 0.125861075 0.128549412 0.129022758 0.131042092 0.133786516 0.136506486 0.137761471 0.138623632 0.139650556 0.140561222 0.143516765 0.144666293 0.145936805 0.146809229 0.152008394 0.153629182 0.154227557 0.160748057 0.160992715 0.168573778 0.171465680 0.176055633 0.179111612 0.181640311 0.184506957 0.189130345 0.190212643 0.191923804 0.201345444 0.202235233 0.206292364 0.206967755 0.207268925 0.212387308 0.212583590 0.215634507 0.217039854 0.220481151 0.220973177 0.224605256 0.225138866 0.227075268 0.231887504 0.234592832 0.235933878 0.238579815 0.246399640 0.248984278 0.252448555 0.256565351 0.257227563 0.258296579 0.262585453 0.271581554 0.282925681 0.292035841 0.300064358 0.300174495 0.301077307 0.307143992 0.307793954 0.309855644 0.320062657 0.321366526 0.326463942 0.330750333 0.336677568 0.347772814 0.352033760 0.355655435 0.360931523 0.362071509 0.364154237 0.384577081 0.407212514 0.414488281 0.430281996 0.432174548 0.435354837 0.451007226 0.464716745 0.475667122 0.478863660 0.480442748 0.486676342 0.498903569 0.503976607 0.515235041 0.518078509 0.543848541 0.566941784 0.567725478 0.586668770 0.592175037 0.605881133 0.644289496 0.645528799 0.668061894 0.675677911 0.687393097 0.704061068 0.704362825 0.705498219 0.710316112 0.717268328 0.734248116 0.738032333 0.739779647 0.747580313 0.750842829 0.771616082 0.775989405 0.809091524 0.821850709 0.824143045 0.828943206 0.834303203 0.848000073 0.849539645 0.851411323 0.854621407 0.863450990 0.867473649 0.875935103 0.887564330 0.891144250 0.892500149 0.893643863 0.902132961 0.910344290 0.918074232 0.923387953 0.924597432 0.932020133 0.935778728 0.956126795 0.962957113 0.965279633 0.970109363 0.978066377 0.982601563 0.998657037 1.013015632 1.016273378 1.021923679 1.040211974 1.055122765 1.071283531 1.072932171 1.079545037 1.087402799 1.108537230 1.110436722 1.118226502 1.119203666 1.122635151 1.123978488 1.141893099 1.149604258 1.161766044 1.170197545 1.177297257 1.188351765 1.200773343 1.222090100 1.234177247 1.258212932 1.296489621 1.298365837 1.314745682 1.326484583 1.327547566 1.330256566 1.331437578 1.334802711 1.342452486 1.349192663 1.368543767 1.380011939 1.381339879 1.381879367 1.429626680 1.517021880 1.557999496 1.684818694 1.922979587</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">266</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92902041" y3="-0.95488296" z3="-0.67506751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61875337" y3="-1.94774564" z3="-1.53232991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.10009551" y3="-0.9938608" z3="-1.39566629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7851988" y3="1.47774527" z3="-1.05407341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29523931" y3="0.30968984" z3="-0.4954927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66333" y3="2.73210585" z3="-1.1632732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00977276" y3="2.73384188" z3="-0.84403608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37326197" y3="4.99007614" z3="-0.39585311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81042338" y3="3.84538029" z3="-0.90949629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74366692" y3="5.86537128" z3="-0.20882734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10670552" y3="1.60367348" z3="-1.69147957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12966403" y3="0.353116" z3="0.21383889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72268805" y3="0.37635853" z3="-0.65478789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61028149" y3="0.72563227" z3="0.2639005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.68159247" y3="-0.86470324" z3="-1.51844641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09440038" y3="-2.47381018" z3="-1.33162855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.96781526" y3="-5.48833714" z3="-6.29558683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.71150743" y3="-5.05354941" z3="-5.32530069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.03804657" y3="-3.91223022" z3="-2.8615285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.68241322" y3="-3.67302156" z3="-5.17747095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.43310382" y3="-5.87986301" z3="-4.23384048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11076129" y3="-5.30313697" z3="-3.01177203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35482379" y3="-3.0707697" z3="-3.95236735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.90700836" y3="-3.00602058" z3="-6.01338663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.4804696" y3="-6.96759778" z3="-4.32833032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93074614" y3="-5.93588291" z3="-2.13854304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64607342" y3="-3.36424424" z3="-1.61327673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35244767" y3="-3.84317321" z3="-0.86298106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70105467" y3="-4.84369952" z3="-1.1319439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37784008" y3="-3.54528947" z3="0.58682904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40013696" y3="-3.07734926" z3="3.3465381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6840346" y3="-4.58190335" z3="1.47680102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10175449" y3="-2.26994504" z3="1.09000618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11031606" y3="-2.03825825" z3="2.46119353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68583504" y3="-4.35079932" z3="2.85124689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8813128" y3="-5.58614058" z3="1.09356027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10536579" y3="-1.42770462" z3="0.42868475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11909482" y3="-1.03212417" z3="2.82262817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89012431" y3="-5.17690485" z3="3.53790556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39533099" y3="-2.89940349" z3="4.42590286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.30990848" y3="-1.73472742" z3="-3.92115704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45892251" y3="-1.33166273" z3="-3.01994312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34215261" y3="3.70007896" z3="-1.08082889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13802332" y3="-2.96749042" z3="-1.70050263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92016802" y3="-3.15118777" z3="-0.5559226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1047707" y3="-2.2828582" z3="0.384229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83280347" y3="-0.72004689" z3="0.65279415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74294552" y3="-0.27113419" z3="-0.91234622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52045828" y3="0.47270279" z3="1.19696041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.02877209" y3="-1.0609662" z3="2.05115286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40718438" y3="-4.36222602" z3="-0.3285299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12041075" y3="-4.60875391" z3="0.87404155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06654608" y3="-0.00524904" z3="-1.7400403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38292578" y3="0.61001011" z3="-0.7239985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.39364285" y3="-1.09849863" z3="-1.2497187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64632059" y3="0.57529606" z3="0.52830316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13245532" y3="0.18291667" z3="2.18922587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99506667" y3="1.46636132" z3="1.29561044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.48966055" y3="-0.11557984" z3="2.39055942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.84432203" y3="-1.74023964" z3="1.74644422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.50551441" y3="-1.50985821" z3="2.91408023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05690144" y3="-4.02716128" z3="0.89615379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50630131" y3="-4.35862224" z3="1.75344054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35104376" y3="-5.68282603" z3="0.86327284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28684604" y3="-2.19803604" z3="-0.17373183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1375192" y3="-3.28887144" z3="-1.04223811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48962488" y3="-4.44794097" z3="-0.63224126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99738567" y3="-4.51140821" z3="0.66593758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15193362" y3="-3.45944821" z3="1.56389544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78956945" y3="-2.30229275" z3="1.13487895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49206846" y3="-3.21130271" z3="-2.07330062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34247376" y3="-5.28326333" z3="-1.31759154">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25866293" y3="-5.70104581" z3="1.0911177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74808865" y3="-3.54645541" z3="2.57363138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88795601" y3="-1.45917615" z3="1.82013379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49972558" y3="4.02758115" z3="-0.0093803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86886973" y3="3.80833963" z3="-0.08119711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39389309" y3="3.25938895" z3="-1.24598791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.5917694" y3="2.95619382" z3="-2.34348493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22327318" y3="3.17525058" z3="-2.25219226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.06503465" y3="4.41277992" z3="0.91641836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52662135" y3="4.03420592" z3="0.75834916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82722728" y3="2.96268184" z3="-1.30873626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04078889" y3="2.53894638" z3="-3.24561711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41916309" y3="2.91353848" z3="-3.09445533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16764279" y3="-5.91977627" z3="2.27820119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76156871" y3="-6.39719166" z3="0.22474839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29786712" y3="2.65168839" z3="-2.38164643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46534121" y3="3.02708872" z3="-0.27446639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64452497" y3="0.1687795" z3="-1.99999414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96638703" y3="1.41484224" z3="-1.86353579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8313119" y3="0.10062291" z3="-2.780913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.3134274" y3="1.21034565" z3="-3.42948366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34812245" y3="-0.86027641" z3="-2.86594559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.22392291" y3="1.14568346" z3="-4.03165987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47435762" y3="2.53795341" z3="-2.57494103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61583351" y3="2.43849263" z3="-3.33367318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94173043" y3="3.48954104" z3="-2.52100914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98480642" y3="3.31505467" z3="-3.87371915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57429252" y3="3.90691427" z3="-0.24283863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75063076" y3="5.05635405" z3="-0.06094763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9187827" y3="3.96481741" z3="0.22102553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.42691298" y3="5.1125982" z3="0.78042975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55169252" y3="3.07937874" z3="0.13437409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4629614" y3="5.13109045" z3="1.13045779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.30929319" y3="6.23417577" z3="0.50808957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62014459" y3="6.26813937" z3="0.91438407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.66809337" y3="7.11289229" z3="0.62792251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.03829695" y3="7.1776324" z3="1.35458196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36501493" y3="-3.90461443" z3="-2.87024005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5461111" y3="-4.94279525" z3="-2.5534619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.24121423" y3="-3.57433991" z3="-3.45964318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49454506" y3="-3.89363311" z3="-3.54512601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69913252" y3="-1.57740973" z3="-2.07545143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4372904" y3="-1.09670446" z3="-2.74271838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5291581" y3="-0.92195934" z3="-1.20719234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75237026" y3="-1.61930068" z3="-2.63738455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.929,-.9549,-.6751;6.6188,-1.9477,-1.5323;6.1001,-.9939,-1.3957;4.7852,1.4777,-1.0541;4.2952,.3097,-.4955;2.6633,2.7321,-1.1633;4.0098,2.7338,-.844;2.3733,4.9901,-.3959;1.8104,3.8454,-.9095;1.7437,5.8654,-.2088;2.1067,1.6037,-1.6915;3.1297,.3531,.2138;1.7227,.3764,-.6548;.6103,.7256,.2639;1.6816,-.8647,-1.5184;1.0944,-2.4738,-1.3316;1.9678,-5.4883,-6.2956;1.7115,-5.0535,-5.3253;1.038,-3.9122,-2.8615;1.6824,-3.673,-5.1775;1.4331,-5.8799,-4.2338;1.1108,-5.3031,-3.0118;1.3548,-3.0708,-3.9524;1.907,-3.006,-6.0134;1.4805,-6.9676,-4.3283;.9307,-5.9359,-2.1385;.6461,-3.3642,-1.6133;-.3524,-3.8432,-.863;-.7011,-4.8437,-1.1319;-.3778,-3.5453,.5868;-.4001,-3.0773,3.3465;-.684,-4.5819,1.4768;-.1018,-2.2699,1.09;-.1103,-2.0383,2.4612;-.6858,-4.3508,2.8512;-.8813,-5.5861,1.0936;.1054,-1.4277,.4287;.1191,-1.0321,2.8226;-.8901,-5.1769,3.5379;-.3953,-2.8994,4.4259;1.3099,-1.7347,-3.9212;1.4589,-1.3317,-3.0199;.3422,3.7001,-1.0808;-2.138,-2.9675,-1.7005;-2.9202,-3.1512,-.5559;-3.1048,-2.2829,.3842;-3.8328,-.72,.6528;-4.7429,-.2711,-.9123;-2.5205,.4727,1.197;-5.0288,-1.061,2.0512;-3.4072,-4.3622,-.3285;-4.1204,-4.6088,.874;-4.0665,-.0052,-1.74;-5.3829,.61,-.724;-5.3936,-1.0985,-1.2497;-1.6463,.5753,.5283;-2.1325,.1829,2.1892;-2.9951,1.4664,1.2956;-5.4897,-.1156,2.3906;-5.8443,-1.7402,1.7464;-4.5055,-1.5099,2.9141;-5.0569,-4.0272,.8962;-3.5063,-4.3586,1.7534;-4.351,-5.6828,.8633;4.2868,-2.198,-.1737;4.1375,-3.2889,-1.0422;3.4896,-4.4479,-.6322;2.9974,-4.5114,.6659;3.1519,-3.4594,1.5639;3.7896,-2.3023,1.1349;4.4921,-3.2113,-2.0733;3.3425,-5.2833,-1.3176;2.2587,-5.701,1.0911;2.7481,-3.5465,2.5736;3.888,-1.4592,1.8201;-.4997,4.0276,-.0094;-1.8689,3.8083,-.0812;-2.3939,3.2594,-1.246;-1.5918,2.9562,-2.3435;-.2233,3.1753,-2.2522;-.065,4.4128,.9164;-2.5266,4.0342,.7583;-3.8272,2.9627,-1.3087;-2.0408,2.5389,-3.2456;.4192,2.9135,-3.0945;2.1676,-5.9198,2.2782;1.7616,-6.3972,.2247;-4.2979,2.6517,-2.3816;-4.4653,3.0271,-.2745;6.6445,.1688,-2;5.9664,1.4148,-1.8635;7.8313,.1006,-2.7809;8.3134,1.2103,-3.4295;8.3481,-.8603,-2.8659;9.2239,1.1457,-4.0317;6.4744,2.538,-2.5749;7.6158,2.4385,-3.3337;5.9417,3.4895,-2.521;7.9848,3.3151,-3.8737;4.5743,3.9069,-.2428;3.7506,5.0564,-.0609;5.9188,3.9648,.221;6.4269,5.1126,.7804;6.5517,3.0794,.1344;7.463,5.1311,1.1305;4.3093,6.2342,.5081;5.6201,6.2681,.9144;3.6681,7.1129,.6279;6.0383,7.1776,1.3546;-2.365,-3.9046,-2.8702;-2.5461,-4.9428,-2.5535;-3.2412,-3.5743,-3.4596;-1.4945,-3.8936,-3.5451;-1.6991,-1.5774,-2.0755;-2.4373,-1.0967,-2.7427;-1.5292,-.922,-1.2072;-.7524,-1.6193,-2.6374;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662918442440</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001580906642 0.000191138461 0.018517095735 0.005345889830</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057117554 -0.000185831 0.000058800 0.000202140 0.000281320 0.000360861 0.000404824 0.000523680 0.000669939 0.000817888 0.000971956 0.001035044 0.001199246 0.001284776 0.001423856 0.001521003 0.001707024 0.001795546 0.002014588 0.002309494 0.002555920 0.002686921 0.002971740 0.003056552 0.003553583 0.003690693 0.003992412 0.004582123 0.004836881 0.005022649 0.005186309 0.005367333 0.006084660 0.006439310 0.006532863 0.006919155 0.007146934 0.007467449 0.008184941 0.008734290 0.008862693 0.009570383 0.009859860 0.009939187 0.010994947 0.011187268 0.011903855 0.012597601 0.013382739 0.013802378 0.014041136 0.014628659 0.014948408 0.015459003 0.015892051 0.016614780 0.016743241 0.018615408 0.019264732 0.019437377 0.020297625 0.020545071 0.021563249 0.021840162 0.022496256 0.022791315 0.023496719 0.023834216 0.024521476 0.025901739 0.026660338 0.026938996 0.027211893 0.027540281 0.028339706 0.029076295 0.030945250 0.031552745 0.031888914 0.034134160 0.034736085 0.036039112 0.039057448 0.039545937 0.041987780 0.045421550 0.046147838 0.046794844 0.048894031 0.049699970 0.049984717 0.050842812 0.051545547 0.052191988 0.052289147 0.052414204 0.052988784 0.053622697 0.054978786 0.056110626 0.056442826 0.056729867 0.057017606 0.057246295 0.057790473 0.058619275 0.059257327 0.059761074 0.061367771 0.062128821 0.062927720 0.064309803 0.064576523 0.065100710 0.066042307 0.067545612 0.067946457 0.068996314 0.070535010 0.072126299 0.072571241 0.072919054 0.072994918 0.074612749 0.078756249 0.080876326 0.081903416 0.083357620 0.084556253 0.087496065 0.089000480 0.089425808 0.089845615 0.091325223 0.093339093 0.094581779 0.095498783 0.096279798 0.096864192 0.098526311 0.100174516 0.100706125 0.102754854 0.103954312 0.104480222 0.106707263 0.109198820 0.111022897 0.112297743 0.112863805 0.113925487 0.114806436 0.116992987 0.117370661 0.118653613 0.119274301 0.120653548 0.122322089 0.125143459 0.125863850 0.128550109 0.129024697 0.131048786 0.133807000 0.136507355 0.137774093 0.138624244 0.139650856 0.140563094 0.143517039 0.144667377 0.145938183 0.146809344 0.152008735 0.153629778 0.154228158 0.160752219 0.160993533 0.168578378 0.171465730 0.176056254 0.179112581 0.181640992 0.184507807 0.189133331 0.190220252 0.191944496 0.201351384 0.202235225 0.206292711 0.206967942 0.207269008 0.212391185 0.212584424 0.215635145 0.217039842 0.220483264 0.220973315 0.224606347 0.225141606 0.227093791 0.231888126 0.234593035 0.235935619 0.238579998 0.246402079 0.248995810 0.252460976 0.256565428 0.257228983 0.258307940 0.262585658 0.271581729 0.282925780 0.292035855 0.300071802 0.300176405 0.301077543 0.307144022 0.307794504 0.309855653 0.320063889 0.321366536 0.326464404 0.330794356 0.336677978 0.347773212 0.352034725 0.355655675 0.360945711 0.362071847 0.364154345 0.384577213 0.407214404 0.414488336 0.430282187 0.432174770 0.435376420 0.451041595 0.464723385 0.475680977 0.478865259 0.480445714 0.486688924 0.498904024 0.503987071 0.515235771 0.518081731 0.543848865 0.566942023 0.567728596 0.586693752 0.592177794 0.605881301 0.644297414 0.645529474 0.668071708 0.675678551 0.687402319 0.704079167 0.704362899 0.705510760 0.710567622 0.717272533 0.734267859 0.738032427 0.739779965 0.747585684 0.750842839 0.771616100 0.775989504 0.809115976 0.821850973 0.824145834 0.828943258 0.834304220 0.848011113 0.849539716 0.851412539 0.854627248 0.863459084 0.867473657 0.875935957 0.887565201 0.891148160 0.892501856 0.893645363 0.902133789 0.910344359 0.918079884 0.923392832 0.924597901 0.932020198 0.935782985 0.956133524 0.962963731 0.965292265 0.970110717 0.978099102 0.982603998 0.998657462 1.013017729 1.016286284 1.021924826 1.040213092 1.055122766 1.071291333 1.073005636 1.079583886 1.087404954 1.108538996 1.110437313 1.118244462 1.119213161 1.122635383 1.123980260 1.141895310 1.149653267 1.161766913 1.170197626 1.177297278 1.188394319 1.200773672 1.222093356 1.234182977 1.258216080 1.296490347 1.298366622 1.314745746 1.326484798 1.327550558 1.330256974 1.331437749 1.334803037 1.342453100 1.349193443 1.368590556 1.380012295 1.381339902 1.381881292 1.429626937 1.517049669 1.557999944 1.684822964 1.922982198</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">267</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92872761" y3="-0.95386864" z3="-0.67315722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61764314" y3="-1.94889385" z3="-1.52955793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09957162" y3="-0.99452491" z3="-1.39407142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78637209" y3="1.47828633" z3="-1.05552912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29593501" y3="0.31140359" z3="-0.49484427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66541527" y3="2.73375914" z3="-1.16461576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.01211445" y3="2.7351678" z3="-0.84680432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37685035" y3="4.99260709" z3="-0.39905961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81327236" y3="3.84760349" z3="-0.9108754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74743131" y3="5.86815329" z3="-0.21093823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10721343" y3="1.60511626" z3="-1.69062185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13107268" y3="0.35678095" z3="0.21547686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72293443" y3="0.37999671" z3="-0.65151196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.611926" y3="0.73166438" z3="0.26788933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67976386" y3="-0.86227154" z3="-1.51326999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0927544" y3="-2.47106419" z3="-1.32950384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98163947" y3="-5.48398299" z3="-6.29156398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72230618" y3="-5.04942968" z3="-5.32190473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04050764" y3="-3.90876335" z3="-2.86016135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69122254" y3="-3.66879906" z3="-5.17427584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44195429" y3="-5.87612167" z3="-4.23111475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11535606" y3="-5.29970844" z3="-3.00991867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.35963561" y3="-3.0669761" z3="-3.95002643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91729949" y3="-3.00155866" z3="-6.00969618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49107811" y3="-6.96389151" z3="-4.32539196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93369477" y3="-5.9326529" z3="-2.13711413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64444127" y3="-3.36019118" z3="-1.61357092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35519407" y3="-3.840483" z3="-0.86482703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.70221605" y3="-4.84174257" z3="-1.13401822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38309446" y3="-3.54271449" z3="0.58502675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4097524" y3="-3.07710629" z3="3.34601096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69299204" y3="-4.57906087" z3="1.47462874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10521388" y3="-2.26878595" z3="1.08948456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11553735" y3="-2.0384223" z3="2.46100698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69844622" y3="-4.34796315" z3="2.84901663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88709083" y3="-5.58699579" z3="1.09298371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10530656" y3="-1.42678416" z3="0.42869349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11565378" y3="-1.03281763" z3="2.82283807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9071589" y3="-5.17365242" z3="3.5341657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40773469" y3="-2.89931649" z3="4.42538002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31323277" y3="-1.73103214" z3="-3.91814254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4604887" y3="-1.32871882" z3="-3.01651037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34485281" y3="3.70116281" z3="-1.07976686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13783397" y3="-2.96553081" z3="-1.70388582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92244589" y3="-3.15248158" z3="-0.56132122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10721102" y3="-2.288699" z3="0.38232561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83610944" y3="-0.72672191" z3="0.65637376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.75297445" y3="-0.27767463" z3="-0.90497517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52370228" y3="0.467617" z3="1.19662783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.02404882" y3="-1.07199278" z3="2.06050359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40969547" y3="-4.36462669" z3="-0.33832016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12691978" y3="-4.61442083" z3="0.86102528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.07974135" y3="-0.01439397" z3="-1.73621784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.389544" y3="0.60568594" z3="-0.71504187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.40742067" y3="-1.10353788" z3="-1.2377854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65416164" y3="0.57566526" z3="0.5232067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.12846735" y3="0.17524686" z3="2.18504798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00067267" y3="1.45998298" z3="1.30137797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.48271083" y3="-0.1282098" z3="2.406946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.84140232" y3="-1.75024489" z3="1.75866789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.49492399" y3="-1.52469959" z3="2.9181934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06225688" y3="-4.03170736" z3="0.88287168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51571023" y3="-4.36905867" z3="1.74291981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35914965" y3="-5.68727725" z3="0.84475575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28565557" y3="-2.19603715" z3="-0.17062896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13665087" y3="-3.2879003" z3="-1.03787638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48765088" y3="-4.44607974" z3="-0.6270993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99383912" y3="-4.50766756" z3="0.67055634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14817672" y3="-3.45467812" z3="1.56738928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78695287" y3="-2.29835265" z3="1.13761061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49230114" y3="-3.21192092" z3="-2.0686717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34072614" y3="-5.28203657" z3="-1.31159461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25344375" y3="-5.69618536" z3="1.09621407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7431228" y3="-3.54012101" z3="2.57676174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88491231" y3="-1.45423025" z3="1.82186822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49509124" y3="4.02156507" z3="-0.00462681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86429747" y3="3.80117944" z3="-0.07531693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39093155" y3="3.25658607" z3="-1.24144846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59031731" y3="2.95935136" z3="-2.34121497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22217883" y3="3.18123982" z3="-2.25260641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05919332" y3="4.40315104" z3="0.921669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52024425" y3="4.02148349" z3="0.76767941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82379633" y3="2.95723842" z3="-1.30247019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04064119" y3="2.54522361" z3="-3.24399984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41872413" y3="2.92528705" z3="-3.09772195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15969822" y3="-5.91279398" z3="2.28331027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75783057" y3="-6.39364209" z3="0.23006988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.29423105" y3="2.64129444" z3="-2.37422091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46203123" y3="3.02504801" z3="-0.26869969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64434964" y3="0.16684816" z3="-2.00050291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96679538" y3="1.41338012" z3="-1.86587582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.83066455" y3="0.09689019" z3="-2.78201389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.31252704" y3="1.20511783" z3="-3.4332725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34726234" y3="-0.86421925" z3="-2.86537346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2226201" y3="1.13904879" z3="-4.03594548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47439074" y3="2.53486254" z3="-2.58005306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61518381" y3="2.43352829" z3="-3.33962088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.94194503" y3="3.48663517" z3="-2.52756951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.98379828" y3="3.30875433" z3="-3.8820084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57788281" y3="3.90880755" z3="-0.24799906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75487023" y3="5.05873941" z3="-0.06637264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92288389" y3="3.96677803" z3="0.21417402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43210101" y3="5.1150237" z3="0.77163282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55520526" y3="3.0810965" z3="0.12835352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46840185" y3="5.13360152" z3="1.12053544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31465799" y3="6.23696016" z3="0.50071505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62595241" y3="6.27097305" z3="0.90531204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67389509" y3="7.11605615" z3="0.62071117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04489304" y3="7.18079277" z3="1.34417335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36190298" y3="-3.89987678" z3="-2.87653683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54077281" y3="-4.93974117" z3="-2.5618943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23814896" y3="-3.56976885" z3="-3.46592415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49062403" y3="-3.88534873" z3="-3.5503942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69841093" y3="-1.57460411" z3="-2.07444916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43620126" y3="-1.09123162" z3="-2.74063568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5293547" y3="-0.92231765" z3="-1.20356843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75106736" y3="-1.61544919" z3="-2.63610069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9287,-.9539,-.6732;6.6176,-1.9489,-1.5296;6.0996,-.9945,-1.3941;4.7864,1.4783,-1.0555;4.2959,.3114,-.4948;2.6654,2.7338,-1.1646;4.0121,2.7352,-.8468;2.3769,4.9926,-.3991;1.8133,3.8476,-.9109;1.7474,5.8682,-.2109;2.1072,1.6051,-1.6906;3.1311,.3568,.2155;1.7229,.38,-.6515;.6119,.7317,.2679;1.6798,-.8623,-1.5133;1.0928,-2.4711,-1.3295;1.9816,-5.484,-6.2916;1.7223,-5.0494,-5.3219;1.0405,-3.9088,-2.8602;1.6912,-3.6688,-5.1743;1.442,-5.8761,-4.2311;1.1154,-5.2997,-3.0099;1.3596,-3.067,-3.95;1.9173,-3.0016,-6.0097;1.4911,-6.9639,-4.3254;.9337,-5.9327,-2.1371;.6444,-3.3602,-1.6136;-.3552,-3.8405,-.8648;-.7022,-4.8417,-1.134;-.3831,-3.5427,.585;-.4098,-3.0771,3.346;-.693,-4.5791,1.4746;-.1052,-2.2688,1.0895;-.1155,-2.0384,2.461;-.6984,-4.348,2.849;-.8871,-5.587,1.093;.1053,-1.4268,.4287;.1157,-1.0328,2.8228;-.9072,-5.1737,3.5342;-.4077,-2.8993,4.4254;1.3132,-1.731,-3.9181;1.4605,-1.3287,-3.0165;.3449,3.7012,-1.0798;-2.1378,-2.9655,-1.7039;-2.9224,-3.1525,-.5613;-3.1072,-2.2887,.3823;-3.8361,-.7267,.6564;-4.753,-.2777,-.905;-2.5237,.4676,1.1966;-5.024,-1.072,2.0605;-3.4097,-4.3646,-.3383;-4.1269,-4.6144,.861;-4.0797,-.0144,-1.7362;-5.3895,.6057,-.715;-5.4074,-1.1035,-1.2378;-1.6542,.5757,.5232;-2.1285,.1752,2.185;-3.0007,1.46,1.3014;-5.4827,-.1282,2.4069;-5.8414,-1.7502,1.7587;-4.4949,-1.5247,2.9182;-5.0623,-4.0317,.8829;-3.5157,-4.3691,1.7429;-4.3591,-5.6873,.8448;4.2857,-2.196,-.1706;4.1367,-3.2879,-1.0379;3.4877,-4.4461,-.6271;2.9938,-4.5077,.6706;3.1482,-3.4547,1.5674;3.787,-2.2984,1.1376;4.4923,-3.2119,-2.0687;3.3407,-5.282,-1.3116;2.2534,-5.6962,1.0962;2.7431,-3.5401,2.5768;3.8849,-1.4542,1.8219;-.4951,4.0216,-.0046;-1.8643,3.8012,-.0753;-2.3909,3.2566,-1.2414;-1.5903,2.9594,-2.3412;-.2222,3.1812,-2.2526;-.0592,4.4032,.9217;-2.5202,4.0215,.7677;-3.8238,2.9572,-1.3025;-2.0406,2.5452,-3.244;.4187,2.9253,-3.0977;2.1597,-5.9128,2.2833;1.7578,-6.3936,.2301;-4.2942,2.6413,-2.3742;-4.462,3.025,-.2687;6.6443,.1668,-2.0005;5.9668,1.4134,-1.8659;7.8307,.0969,-2.782;8.3125,1.2051,-3.4333;8.3473,-.8642,-2.8654;9.2226,1.139,-4.0359;6.4744,2.5349,-2.5801;7.6152,2.4335,-3.3396;5.9419,3.4866,-2.5276;7.9838,3.3088,-3.882;4.5779,3.9088,-.248;3.7549,5.0587,-.0664;5.9229,3.9668,.2142;6.4321,5.115,.7716;6.5552,3.0811,.1284;7.4684,5.1336,1.1205;4.3147,6.237,.5007;5.626,6.271,.9053;3.6739,7.1161,.6207;6.0449,7.1808,1.3442;-2.3619,-3.8999,-2.8765;-2.5408,-4.9397,-2.5619;-3.2381,-3.5698,-3.4659;-1.4906,-3.8853,-3.5504;-1.6984,-1.5746,-2.0744;-2.4362,-1.0912,-2.7406;-1.5294,-.9223,-1.2036;-.7511,-1.6154,-2.6361;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662917374531</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001418515964 0.000185066928 0.025609826001 0.005306269734</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057121829 -0.000199245 0.000071102 0.000186778 0.000278284 0.000360401 0.000403496 0.000523308 0.000669201 0.000815047 0.000971308 0.001035542 0.001197446 0.001286134 0.001424103 0.001522669 0.001705410 0.001793912 0.002014822 0.002309484 0.002555729 0.002686034 0.002971920 0.003072897 0.003552407 0.003691324 0.003992851 0.004581907 0.004836629 0.005023066 0.005186630 0.005369603 0.006084052 0.006441962 0.006537876 0.006917608 0.007149882 0.007465591 0.008184725 0.008738525 0.008864063 0.009573984 0.009860801 0.009937089 0.010996739 0.011188144 0.011904930 0.012603448 0.013383480 0.013803063 0.014043672 0.014628754 0.014948398 0.015459601 0.015892681 0.016615923 0.016744257 0.018624176 0.019319058 0.019437697 0.020295572 0.020564841 0.021563469 0.021840787 0.022494405 0.022801559 0.023496753 0.023833686 0.024523283 0.025901999 0.026662790 0.026946930 0.027211460 0.027541900 0.028345067 0.029077632 0.030948989 0.031553218 0.031888940 0.034150234 0.034746967 0.036039486 0.039057522 0.039545756 0.041987934 0.045422190 0.046147052 0.046796118 0.048894909 0.049700743 0.050004522 0.050846297 0.051545849 0.052192521 0.052289164 0.052414226 0.052991496 0.053623208 0.054992813 0.056110787 0.056443432 0.056729903 0.057017727 0.057246920 0.057794760 0.058623858 0.059258882 0.059766979 0.061367751 0.062134079 0.062932529 0.064318741 0.064578940 0.065103535 0.066054304 0.067559712 0.067946644 0.068997118 0.070535258 0.072129779 0.072573623 0.072921676 0.072996419 0.074615085 0.078760967 0.080875910 0.081915945 0.083360465 0.084561510 0.087485377 0.089004423 0.089425561 0.089846141 0.091324753 0.093339070 0.094581664 0.095498925 0.096284496 0.096864253 0.098530082 0.100174682 0.100706009 0.102755097 0.103961380 0.104509351 0.106743226 0.109199656 0.111025366 0.112305495 0.112868289 0.113940391 0.114819294 0.116998185 0.117392833 0.118653499 0.119284861 0.120665435 0.122321277 0.125143924 0.125868929 0.128550610 0.129026185 0.131056888 0.133828158 0.136509459 0.137783686 0.138624533 0.139651941 0.140569656 0.143517018 0.144666373 0.145938004 0.146809266 0.152008381 0.153629985 0.154227028 0.160757876 0.160998816 0.168582478 0.171465680 0.176058334 0.179113419 0.181640853 0.184507846 0.189137338 0.190227269 0.191973345 0.201356672 0.202235555 0.206294373 0.206968378 0.207269055 0.212398357 0.212586425 0.215635663 0.217040631 0.220484243 0.220973496 0.224610061 0.225142949 0.227108350 0.231888417 0.234593598 0.235939439 0.238580183 0.246402268 0.248997921 0.252475054 0.256565498 0.257230014 0.258319677 0.262585887 0.271581777 0.282926294 0.292035965 0.300090450 0.300180966 0.301078098 0.307144341 0.307795268 0.309855632 0.320063998 0.321366659 0.326464634 0.330824389 0.336678230 0.347773336 0.352035052 0.355655660 0.360958728 0.362073503 0.364154440 0.384577472 0.407219179 0.414488269 0.430282308 0.432175316 0.435389695 0.451082086 0.464731904 0.475693676 0.478865792 0.480451718 0.486694658 0.498904248 0.503991340 0.515235834 0.518085495 0.543850090 0.566942337 0.567731052 0.586723907 0.592178566 0.605882003 0.644299124 0.645531699 0.668083078 0.675678795 0.687415429 0.704096344 0.704362937 0.705560052 0.710808909 0.717274789 0.734277850 0.738032567 0.739781424 0.747586453 0.750842993 0.771616218 0.775989676 0.809142617 0.821851343 0.824147801 0.828943296 0.834305107 0.848020919 0.849540201 0.851413070 0.854636177 0.863466017 0.867473692 0.875936479 0.887566303 0.891150472 0.892505845 0.893647266 0.902134897 0.910345693 0.918080019 0.923397274 0.924598029 0.932020248 0.935787169 0.956139836 0.962969350 0.965312913 0.970111121 0.978100476 0.982604846 0.998657570 1.013021357 1.016296345 1.021926357 1.040214410 1.055122924 1.071299601 1.073068359 1.079648371 1.087406898 1.108541527 1.110437986 1.118265163 1.119222987 1.122635647 1.123981957 1.141899040 1.149704367 1.161768046 1.170197701 1.177297988 1.188434913 1.200773848 1.222097052 1.234188265 1.258220821 1.296491686 1.298369292 1.314745910 1.326485035 1.327552500 1.330258665 1.331437813 1.334803220 1.342455853 1.349194855 1.368635359 1.380013898 1.381340038 1.381882488 1.429630237 1.517073562 1.558001063 1.684827162 1.923003137</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">268</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92631219" y3="-0.95458585" z3="-0.67541824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61486203" y3="-1.94893251" z3="-1.53335659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09662397" y3="-0.99474464" z3="-1.39724673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78346837" y3="1.47775329" z3="-1.05650523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29345112" y3="0.31052608" z3="-0.49618977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6626971" y3="2.73416232" z3="-1.16192268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00980018" y3="2.73467834" z3="-0.84571784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37618837" y3="4.99235656" z3="-0.39369729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81141081" y3="3.84814263" z3="-0.90602396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7474047" y3="5.86806888" z3="-0.20392216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.10342603" y3="1.60635866" z3="-1.6886557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12911965" y3="0.35550902" z3="0.21501753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.72031203" y3="0.37980375" z3="-0.65076747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61014432" y3="0.73035739" z3="0.27009569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67626296" y3="-0.86152248" z3="-1.51385746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09296959" y3="-2.47193341" z3="-1.3292886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98245949" y3="-5.48643422" z3="-6.2904096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72320224" y3="-5.05174874" z3="-5.32080676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04174688" y3="-3.91070893" z3="-2.85909919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69200761" y3="-3.6711577" z3="-5.17338185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44305003" y3="-5.87825191" z3="-4.22984107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11667023" y3="-5.30164783" z3="-3.00872697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36055445" y3="-3.06906763" z3="-3.94919164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.91791619" y3="-3.00403224" z3="-6.00890879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49218904" y3="-6.96600747" z3="-4.32392969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.935272" y3="-5.93448667" z3="-2.13580359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64605063" y3="-3.36237005" z3="-1.61223107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35267017" y3="-3.84297212" z3="-0.86298409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69924007" y3="-4.84444027" z3="-1.13161935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38046217" y3="-3.54398243" z3="0.58655455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40359222" y3="-3.0757936" z3="3.34671464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68647895" y3="-4.58040231" z3="1.47724884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10505279" y3="-2.26880534" z3="1.08942507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11361424" y3="-2.03713163" z3="2.46066961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68949124" y3="-4.34849538" z3="2.85153032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88017915" y3="-5.58775156" z3="1.0959873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10233955" y3="-1.42695995" z3="0.42755012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11558761" y3="-1.03061177" z3="2.82133607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89457348" y3="-5.1741907" z3="3.53785339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39945495" y3="-2.89736454" z3="4.42599496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31422911" y3="-1.73311749" z3="-3.91802444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45973258" y3="-1.32986258" z3="-3.01645743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34269301" y3="3.70344003" z3="-1.07401726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13791751" y3="-2.97049079" z3="-1.70351314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92118333" y3="-3.15385629" z3="-0.559621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10684247" y3="-2.28598214" z3="0.38030609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83534455" y3="-0.72288418" z3="0.64824801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.74042059" y3="-0.27107748" z3="-0.91905966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52363416" y3="0.46747866" z3="1.19834148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.03610451" y3="-1.06518458" z3="2.04207832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40701975" y3="-4.36546836" z3="-0.33148748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12126856" y3="-4.61168756" z3="0.8704596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.06163755" y3="-0.00213117" z3="-1.74366903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38226522" y3="0.60871597" z3="-0.73071529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38895808" y3="-1.09823115" z3="-1.26023002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64867501" y3="0.57211993" z3="0.53136002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.13743012" y3="0.1741271" z3="2.18998466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99797315" y3="1.46133704" z3="1.29920103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.49649994" y3="-0.1200885" z3="2.3825839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85170159" y3="-1.74236359" z3="1.73305806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.51634318" y3="-1.51744643" z3="2.90539322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05716264" y3="-4.02965321" z3="0.89235353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50795873" y3="-4.3624284" z3="1.75011659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35255612" y3="-5.68501225" z3="0.85881261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28433177" y3="-2.19716682" z3="-0.17249771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13668071" y3="-3.28959255" z3="-1.03928729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.489372" y3="-4.44850544" z3="-0.62795679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99580376" y3="-4.5102459" z3="0.66977786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14866056" y3="-3.45665859" z3="1.56612429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78583225" y3="-2.29965969" z3="1.13582678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4921362" y3="-3.21359154" z3="-2.07014846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34354334" y3="-5.28494617" z3="-1.31208874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25716272" y3="-5.69957688" z3="1.09596345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74372057" y3="-3.54219362" z3="2.57554578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88271752" y3="-1.45521582" z3="1.81978097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49629928" y3="4.02427305" z3="0.00172466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86580841" y3="3.80588152" z3="-0.06843029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39383769" y3="3.26416559" z3="-1.23527892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59424335" y3="2.96691769" z3="-2.33594895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22553276" y3="3.18537932" z3="-2.24704428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05929804" y3="4.40401593" z3="0.92841945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5211711" y3="4.02619275" z3="0.77483635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82729277" y3="2.96756266" z3="-1.29619629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04570416" y3="2.55510666" z3="-3.23928646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41514305" y3="2.92813509" z3="-3.092064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16465498" y3="-5.91636805" z3="2.28315282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76153228" y3="-6.39742912" z3="0.23012902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30029941" y3="2.66167082" z3="-2.36953651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46318488" y3="3.02682388" z3="-0.26044877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.64074487" y3="0.16692045" z3="-2.00366984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.96323947" y3="1.41335079" z3="-1.8678463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82644918" y3="0.09740651" z3="-2.78613053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30781522" y3="1.20605045" z3="-3.43705833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.34297254" y3="-0.86368031" z3="-2.87046982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.2174425" y3="1.14034237" z3="-4.04044933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.47031663" y3="2.53529028" z3="-2.58168901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.61055988" y3="2.43443621" z3="-3.34210556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93793177" y3="3.48704216" z3="-2.52822254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97881071" y3="3.31003715" z3="-3.88415725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57685646" y3="3.90746499" z3="-0.24637513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75462068" y3="5.05759008" z3="-0.06266764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92247523" y3="3.96447374" z3="0.21415988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43298494" y3="5.11206751" z3="0.77171884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55431913" y3="3.07860422" z3="0.12694544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46981321" y3="5.12988854" z3="1.11918348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31567536" y3="6.23513141" z3="0.50452585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62757677" y3="6.26829056" z3="0.9072741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67546328" y3="7.11437529" z3="0.62588692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04758482" y3="7.17761369" z3="1.34606806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36221283" y3="-3.90917421" z3="-2.87252644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54217018" y3="-4.94748373" z3="-2.55414464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23807886" y3="-3.58070444" z3="-3.4634454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49077176" y3="-3.89788297" z3="-3.5462089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69921365" y3="-1.5808117" z3="-2.07912097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43692351" y3="-1.10095012" z3="-2.74775802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5310448" y3="-0.9247936" z3="-1.21084538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7516415" y3="-1.62263918" z3="-2.63995586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9263,-.9546,-.6754;6.6149,-1.9489,-1.5334;6.0966,-.9947,-1.3972;4.7835,1.4778,-1.0565;4.2935,.3105,-.4962;2.6627,2.7342,-1.1619;4.0098,2.7347,-.8457;2.3762,4.9924,-.3937;1.8114,3.8481,-.906;1.7474,5.8681,-.2039;2.1034,1.6064,-1.6887;3.1291,.3555,.215;1.7203,.3798,-.6508;.6101,.7304,.2701;1.6763,-.8615,-1.5139;1.093,-2.4719,-1.3293;1.9825,-5.4864,-6.2904;1.7232,-5.0517,-5.3208;1.0417,-3.9107,-2.8591;1.692,-3.6712,-5.1734;1.4431,-5.8783,-4.2298;1.1167,-5.3016,-3.0087;1.3606,-3.0691,-3.9492;1.9179,-3.004,-6.0089;1.4922,-6.966,-4.3239;.9353,-5.9345,-2.1358;.6461,-3.3624,-1.6122;-.3527,-3.843,-.863;-.6992,-4.8444,-1.1316;-.3805,-3.544,.5866;-.4036,-3.0758,3.3467;-.6865,-4.5804,1.4772;-.1051,-2.2688,1.0894;-.1136,-2.0371,2.4607;-.6895,-4.3485,2.8515;-.8802,-5.5878,1.096;.1023,-1.427,.4276;.1156,-1.0306,2.8213;-.8946,-5.1742,3.5379;-.3995,-2.8974,4.426;1.3142,-1.7331,-3.918;1.4597,-1.3299,-3.0165;.3427,3.7034,-1.074;-2.1379,-2.9705,-1.7035;-2.9212,-3.1539,-.5596;-3.1068,-2.286,.3803;-3.8353,-.7229,.6482;-4.7404,-.2711,-.9191;-2.5236,.4675,1.1983;-5.0361,-1.0652,2.0421;-3.407,-4.3655,-.3315;-4.1213,-4.6117,.8705;-4.0616,-.0021,-1.7437;-5.3823,.6087,-.7307;-5.389,-1.0982,-1.2602;-1.6487,.5721,.5314;-2.1374,.1741,2.19;-2.998,1.4613,1.2992;-5.4965,-.1201,2.3826;-5.8517,-1.7424,1.7331;-4.5163,-1.5174,2.9054;-5.0572,-4.0297,.8924;-3.508,-4.3624,1.7501;-4.3526,-5.685,.8588;4.2843,-2.1972,-.1725;4.1367,-3.2896,-1.0393;3.4894,-4.4485,-.628;2.9958,-4.5102,.6698;3.1487,-3.4567,1.5661;3.7858,-2.2997,1.1358;4.4921,-3.2136,-2.0701;3.3435,-5.2849,-1.3121;2.2572,-5.6996,1.096;2.7437,-3.5422,2.5755;3.8827,-1.4552,1.8198;-.4963,4.0243,.0017;-1.8658,3.8059,-.0684;-2.3938,3.2642,-1.2353;-1.5942,2.9669,-2.3359;-.2255,3.1854,-2.247;-.0593,4.404,.9284;-2.5212,4.0262,.7748;-3.8273,2.9676,-1.2962;-2.0457,2.5551,-3.2393;.4151,2.9281,-3.0921;2.1647,-5.9164,2.2832;1.7615,-6.3974,.2301;-4.3003,2.6617,-2.3695;-4.4632,3.0268,-.2604;6.6407,.1669,-2.0037;5.9632,1.4134,-1.8678;7.8264,.0974,-2.7861;8.3078,1.2061,-3.4371;8.343,-.8637,-2.8705;9.2174,1.1403,-4.0404;6.4703,2.5353,-2.5817;7.6106,2.4344,-3.3421;5.9379,3.487,-2.5282;7.9788,3.31,-3.8842;4.5769,3.9075,-.2464;3.7546,5.0576,-.0627;5.9225,3.9645,.2142;6.433,5.1121,.7717;6.5543,3.0786,.1269;7.4698,5.1299,1.1192;4.3157,6.2351,.5045;5.6276,6.2683,.9073;3.6755,7.1144,.6259;6.0476,7.1776,1.3461;-2.3622,-3.9092,-2.8725;-2.5422,-4.9475,-2.5541;-3.2381,-3.5807,-3.4634;-1.4908,-3.8979,-3.5462;-1.6992,-1.5808,-2.0791;-2.4369,-1.101,-2.7478;-1.531,-.9248,-1.2108;-.7516,-1.6226,-2.64;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662925983292</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000546342444 0.000067729836 0.020563892572 0.005333631485</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057121942 -0.000069626 0.000078512 0.000095501 0.000310688 0.000368352 0.000400440 0.000527032 0.000669663 0.000808987 0.000974767 0.001032475 0.001194653 0.001288861 0.001423908 0.001524791 0.001699075 0.001789422 0.002008917 0.002287373 0.002525585 0.002645089 0.002936932 0.003037334 0.003546702 0.003676467 0.003957546 0.004577665 0.004828072 0.005022448 0.005186178 0.005372484 0.006080343 0.006438852 0.006529286 0.006916232 0.007109457 0.007424473 0.008184623 0.008740943 0.008862913 0.009569495 0.009842710 0.009922091 0.010989197 0.011188174 0.011904845 0.012606866 0.013381309 0.013780512 0.013999773 0.014625368 0.014931442 0.015456139 0.015893483 0.016523680 0.016672038 0.018621747 0.019339964 0.019438671 0.020295126 0.020575576 0.021558571 0.021828532 0.022496014 0.022805163 0.023496595 0.023824520 0.024524128 0.025903586 0.026656402 0.026948768 0.027187436 0.027528684 0.028338071 0.029065797 0.030955264 0.031529488 0.031694031 0.034157662 0.034750586 0.036040232 0.039058074 0.039543763 0.041987842 0.045422482 0.046144123 0.046793508 0.048894630 0.049700705 0.050014978 0.050847463 0.051545950 0.052192805 0.052289167 0.052414186 0.052995386 0.053624449 0.055000017 0.056111189 0.056442954 0.056729825 0.057017880 0.057242287 0.057795039 0.058625890 0.059259541 0.059766174 0.061360358 0.062138653 0.062934723 0.064323388 0.064580728 0.065103613 0.066058127 0.067567869 0.067942751 0.068997939 0.070525822 0.072113328 0.072509758 0.072867507 0.072977002 0.074305193 0.078752859 0.080864323 0.081920258 0.083353077 0.084562064 0.087045003 0.089007854 0.089426065 0.089841428 0.091325564 0.093337796 0.094581484 0.095499081 0.096289328 0.096864214 0.098529397 0.100175228 0.100705337 0.102755098 0.103967105 0.104523196 0.106767837 0.109199893 0.111029579 0.112308290 0.112871373 0.113945105 0.114831042 0.116998449 0.117391510 0.118650281 0.119269428 0.120667064 0.122314687 0.125137440 0.125875057 0.128551455 0.129027394 0.131059428 0.133834185 0.136516862 0.137786983 0.138620548 0.139653679 0.140555872 0.143517174 0.144653143 0.145930780 0.146809311 0.152007487 0.153626000 0.154208433 0.160582216 0.160922157 0.168583219 0.171464498 0.176063166 0.179113131 0.181636946 0.184507701 0.189135692 0.190229939 0.191979122 0.201357696 0.202236733 0.206295314 0.206967971 0.207268996 0.212404766 0.212587682 0.215635716 0.217013998 0.220472896 0.220970353 0.224603621 0.225143696 0.227116991 0.231888634 0.234595463 0.235948246 0.238580238 0.246394910 0.248936342 0.252474711 0.256564811 0.257230085 0.258325431 0.262585719 0.271581631 0.282926927 0.292035747 0.300101636 0.300182974 0.301079468 0.307144816 0.307795462 0.309855160 0.320046242 0.321366673 0.326465496 0.330818887 0.336677814 0.347773255 0.352035369 0.355655641 0.360936014 0.362073476 0.364154590 0.384577417 0.407228639 0.414486734 0.430278665 0.432035703 0.435395003 0.451105810 0.464741797 0.475688457 0.478865922 0.480457388 0.486672987 0.498904341 0.503986345 0.515235309 0.518082570 0.543848970 0.566942068 0.567733488 0.586738746 0.592163189 0.605885650 0.644288565 0.645536949 0.668087004 0.675672375 0.687420108 0.704112871 0.704358934 0.705268858 0.710923793 0.717274957 0.734276990 0.738032951 0.739785343 0.747417654 0.750843553 0.771616492 0.775989760 0.809153804 0.821851901 0.824148367 0.828943121 0.834305349 0.848024048 0.849539699 0.851413491 0.854638401 0.863466007 0.867473813 0.875937045 0.887564840 0.891142463 0.892476219 0.893645963 0.902132764 0.910334313 0.918059796 0.923186979 0.924585561 0.932020139 0.935798243 0.956137972 0.962930522 0.965323472 0.970107719 0.978007359 0.982602568 0.998657818 1.013027727 1.016300538 1.021926373 1.040216419 1.055123842 1.071299822 1.073098686 1.079687284 1.087408247 1.108542399 1.110438464 1.118271083 1.119227765 1.122635640 1.123981563 1.141899312 1.149707378 1.161768365 1.170198080 1.177299983 1.188436095 1.200773917 1.222104906 1.234192739 1.258225444 1.296493570 1.298373114 1.314746204 1.326484909 1.327553058 1.330260370 1.331436627 1.334803228 1.342455370 1.349194140 1.368628853 1.380013848 1.381340052 1.381882309 1.429632363 1.516830220 1.557999326 1.684830869 1.922998678</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">269</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92323474" y3="-0.95417447" z3="-0.67703175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60987263" y3="-1.9503688" z3="-1.53665376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09237053" y3="-0.99575642" z3="-1.40073819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.78171433" y3="1.47803357" z3="-1.05997881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29160875" y3="0.3116106" z3="-0.49799247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.66195421" y3="2.7367159" z3="-1.16079911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00983147" y3="2.73588416" z3="-0.8479351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37916945" y3="4.99496468" z3="-0.3910143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8123793" y3="3.85133331" z3="-0.90231743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75153554" y3="5.8708361" z3="-0.19981598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09993946" y3="1.60972113" z3="-1.68653215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12853672" y3="0.35820083" z3="0.21512228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71822841" y3="0.38304142" z3="-0.64813885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60985712" y3="0.73325244" z3="0.27500039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6721888" y3="-0.85809285" z3="-1.51143404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09252255" y3="-2.4699189" z3="-1.32786102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00302338" y3="-5.48577689" z3="-6.28350266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73897252" y3="-5.05106644" z3="-5.3152039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04670892" y3="-3.9100253" z3="-2.85642814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7054882" y3="-3.67050946" z3="-5.1683116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4548877" y3="-5.87749308" z3="-4.22525878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12309235" y3="-5.30087316" z3="-3.00561428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36828852" y3="-3.06834915" z3="-3.94570044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93410553" y3="-3.00336561" z3="-6.00304127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50539313" y3="-6.96519423" z3="-4.31887116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93888872" y3="-5.93372174" z3="-2.1333477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6478314" y3="-3.36171508" z3="-1.61059047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35103507" y3="-3.84339937" z3="-0.86226708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69615215" y3="-4.84526881" z3="-1.13095999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38137828" y3="-3.54319489" z3="0.58690156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41101928" y3="-3.07074622" z3="3.34596616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69073419" y3="-4.57808564" z3="1.4779211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10608746" y3="-2.26722844" z3="1.08869763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1177216" y3="-2.03345132" z3="2.45951489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69683697" y3="-4.34430122" z3="2.85188456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88620552" y3="-5.5839449" z3="1.09649275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1037998" y3="-1.42656366" z3="0.42625231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11207848" y3="-1.02691083" z3="2.81951376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.9040622" y3="-5.16895373" z3="3.53927477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40913423" y3="-2.89095746" z3="4.42503415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31980345" y3="-1.73242245" z3="-3.91559106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46149099" y3="-1.32793706" z3="-3.01386553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34324763" y3="3.70715621" z3="-1.06706561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13674621" y3="-2.97309681" z3="-1.70593195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9216972" y3="-3.15728255" z3="-0.56345637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10963558" y3="-2.2891946" z3="0.37608923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83800963" y3="-0.7268045" z3="0.64570167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.73838914" y3="-0.27151077" z3="-0.92320174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52710816" y3="0.4616837" z3="1.20194532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04322552" y3="-1.07173427" z3="2.03505333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40772995" y3="-4.36891446" z3="-0.33689128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12550238" y3="-4.61510374" z3="0.8627964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.05714697" y3="0.00116621" z3="-1.74442112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.38302289" y3="0.6061769" z3="-0.73507163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.38376105" y3="-1.09918913" z3="-1.26932535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65123506" y3="0.56849683" z3="0.53643786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14248656" y3="0.16503436" z3="2.19331171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00180991" y3="1.45490761" z3="1.30551863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.50421254" y3="-0.12711449" z3="2.37609667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.85819775" y3="-1.74780336" z3="1.72180527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.52647988" y3="-1.52601738" z3="2.89900272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06208906" y3="-4.0339187" z3="0.88124391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5153899" y3="-4.3645604" z3="1.74448308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35546318" y3="-5.68906409" z3="0.85127143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28154968" y3="-2.19605373" z3="-0.17197332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13548559" y3="-3.2904586" z3="-1.03659684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48878098" y3="-4.44910404" z3="-0.62344832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99365136" y3="-4.50841288" z3="0.67378067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14509294" y3="-3.45289998" z3="1.56814569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78211329" y3="-2.29642805" z3="1.13620923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49168017" y3="-3.21640414" z3="-2.06734389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34455074" y3="-5.28719972" z3="-1.305954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25460457" y3="-5.69701867" z3="1.10138164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73910881" y3="-3.53657229" z3="2.57730491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87805565" y3="-1.45081335" z3="1.81873805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49279295" y3="4.02182206" z3="0.01271391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86227712" y3="3.80261968" z3="-0.054474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39320892" y3="3.26723545" z3="-1.22287671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59663444" y3="2.97654737" z3="-2.32780917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22770987" y3="3.19482489" z3="-2.24119877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05306488" y3="4.39639183" z3="0.94034942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51553265" y3="4.01788786" z3="0.79151881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82673121" y3="2.97005387" z3="-1.28163583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05054472" y3="2.56963468" z3="-3.23217891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4114169" y3="2.94133193" z3="-3.08849402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16081234" y3="-5.91166684" z3="2.28894481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.75984801" y3="-6.39637903" z3="0.23622666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30220412" y3="2.66876624" z3="-2.35512924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46007155" y3="3.02380287" z3="-0.24400356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63623062" y3="0.16488329" z3="-2.0093096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95995935" y3="1.41199127" z3="-1.87339525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82044239" y3="0.09365673" z3="-2.79389832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.3015049" y3="1.20133924" z3="-3.44670732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33599878" y3="-0.86797983" z3="-2.87835727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20994323" y3="1.13430618" z3="-4.05176014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4667026" y3="2.53294638" z3="-2.58905405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60546877" y3="2.43045976" z3="-3.35147502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93524446" y3="3.48524834" z3="-2.53529047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.97349021" y3="3.30531878" z3="-3.89491544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57937796" y3="3.90824456" z3="-0.24994738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75859716" y3="5.05908309" z3="-0.06384404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9263278" y3="3.96413412" z3="0.20693102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43946021" y3="5.11134838" z3="0.76289332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55724275" y3="3.07764738" z3="0.11790576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47735778" y3="5.12825031" z3="1.10736507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3223223" y3="6.23618549" z3="0.50160577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63546552" y3="6.26829803" z3="0.90053368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68324326" y3="7.11597821" z3="0.62458255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05757446" y3="7.17735208" z3="1.33784882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35789794" y3="-3.91191661" z3="-2.8753234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53820906" y3="-4.95008407" z3="-2.55769774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23259578" y3="-3.58396174" z3="-3.46828173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48504462" y3="-3.90020603" z3="-3.54718127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69923914" y3="-1.58279119" z3="-2.08078059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43714185" y3="-1.10364431" z3="-2.74951818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53208592" y3="-0.92674154" z3="-1.21233929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75139477" y3="-1.62332631" z3="-2.64099746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9232,-.9542,-.677;6.6099,-1.9504,-1.5367;6.0924,-.9958,-1.4007;4.7817,1.478,-1.06;4.2916,.3116,-.498;2.662,2.7367,-1.1608;4.0098,2.7359,-.8479;2.3792,4.995,-.391;1.8124,3.8513,-.9023;1.7515,5.8708,-.1998;2.0999,1.6097,-1.6865;3.1285,.3582,.2151;1.7182,.383,-.6481;.6099,.7333,.275;1.6722,-.8581,-1.5114;1.0925,-2.4699,-1.3279;2.003,-5.4858,-6.2835;1.739,-5.0511,-5.3152;1.0467,-3.91,-2.8564;1.7055,-3.6705,-5.1683;1.4549,-5.8775,-4.2253;1.1231,-5.3009,-3.0056;1.3683,-3.0683,-3.9457;1.9341,-3.0034,-6.003;1.5054,-6.9652,-4.3189;.9389,-5.9337,-2.1333;.6478,-3.3617,-1.6106;-.351,-3.8434,-.8623;-.6962,-4.8453,-1.131;-.3814,-3.5432,.5869;-.411,-3.0707,3.346;-.6907,-4.5781,1.4779;-.1061,-2.2672,1.0887;-.1177,-2.0335,2.4595;-.6968,-4.3443,2.8519;-.8862,-5.5839,1.0965;.1038,-1.4266,.4263;.1121,-1.0269,2.8195;-.9041,-5.169,3.5393;-.4091,-2.891,4.425;1.3198,-1.7324,-3.9156;1.4615,-1.3279,-3.0139;.3432,3.7072,-1.0671;-2.1367,-2.9731,-1.7059;-2.9217,-3.1573,-.5635;-3.1096,-2.2892,.3761;-3.838,-.7268,.6457;-4.7384,-.2715,-.9232;-2.5271,.4617,1.2019;-5.0432,-1.0717,2.0351;-3.4077,-4.3689,-.3369;-4.1255,-4.6151,.8628;-4.0571,.0012,-1.7444;-5.383,.6062,-.7351;-5.3838,-1.0992,-1.2693;-1.6512,.5685,.5364;-2.1425,.165,2.1933;-3.0018,1.4549,1.3055;-5.5042,-.1271,2.3761;-5.8582,-1.7478,1.7218;-4.5265,-1.526,2.899;-5.0621,-4.0339,.8812;-3.5154,-4.3646,1.7445;-4.3555,-5.6891,.8513;4.2815,-2.1961,-.172;4.1355,-3.2905,-1.0366;3.4888,-4.4491,-.6234;2.9937,-4.5084,.6738;3.1451,-3.4529,1.5681;3.7821,-2.2964,1.1362;4.4917,-3.2164,-2.0673;3.3446,-5.2872,-1.306;2.2546,-5.697,1.1014;2.7391,-3.5366,2.5773;3.8781,-1.4508,1.8187;-.4928,4.0218,.0127;-1.8623,3.8026,-.0545;-2.3932,3.2672,-1.2229;-1.5966,2.9765,-2.3278;-.2277,3.1948,-2.2412;-.0531,4.3964,.9403;-2.5155,4.0179,.7915;-3.8267,2.9701,-1.2816;-2.0505,2.5696,-3.2322;.4114,2.9413,-3.0885;2.1608,-5.9117,2.2889;1.7598,-6.3964,.2362;-4.3022,2.6688,-2.3551;-4.4601,3.0238,-.244;6.6362,.1649,-2.0093;5.96,1.412,-1.8734;7.8204,.0937,-2.7939;8.3015,1.2013,-3.4467;8.336,-.868,-2.8784;9.2099,1.1343,-4.0518;6.4667,2.5329,-2.5891;7.6055,2.4305,-3.3515;5.9352,3.4852,-2.5353;7.9735,3.3053,-3.8949;4.5794,3.9082,-.2499;3.7586,5.0591,-.0638;5.9263,3.9641,.2069;6.4395,5.1113,.7629;6.5572,3.0776,.1179;7.4774,5.1283,1.1074;4.3223,6.2362,.5016;5.6355,6.2683,.9005;3.6832,7.116,.6246;6.0576,7.1774,1.3378;-2.3579,-3.9119,-2.8753;-2.5382,-4.9501,-2.5577;-3.2326,-3.584,-3.4683;-1.485,-3.9002,-3.5472;-1.6992,-1.5828,-2.0808;-2.4371,-1.1036,-2.7495;-1.5321,-.9267,-1.2123;-.7514,-1.6233,-2.641;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926747051</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000871346577 0.000101987113 0.017274198733 0.005328312231</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123968 -0.000069868 0.000062145 0.000192200 0.000239177 0.000337062 0.000399769 0.000552797 0.000667289 0.000805113 0.000978910 0.001034323 0.001194547 0.001303487 0.001422279 0.001527178 0.001674875 0.001781571 0.002001490 0.002248902 0.002485430 0.002587565 0.002877735 0.003020501 0.003536271 0.003671681 0.003946452 0.004572479 0.004812565 0.005007651 0.005185428 0.005370481 0.006056561 0.006434942 0.006509152 0.006914302 0.007101458 0.007405146 0.008184848 0.008734110 0.008864891 0.009572901 0.009841422 0.009916464 0.010987532 0.011184939 0.011904395 0.012607756 0.013378826 0.013774214 0.013991127 0.014625442 0.014927372 0.015445644 0.015894784 0.016458035 0.016665882 0.018623205 0.019356128 0.019437678 0.020285995 0.020568919 0.021553695 0.021825065 0.022472342 0.022802766 0.023493537 0.023822264 0.024524219 0.025903794 0.026656363 0.026950894 0.027188432 0.027527974 0.028349143 0.029048068 0.030959785 0.031322196 0.031592176 0.034164687 0.034755257 0.036035798 0.039057825 0.039537726 0.041988151 0.045423034 0.046145783 0.046789641 0.048882231 0.049700066 0.050025166 0.050845948 0.051545891 0.052192971 0.052289171 0.052414203 0.052995967 0.053626011 0.055004926 0.056110855 0.056443643 0.056729697 0.057018541 0.057239846 0.057796319 0.058627240 0.059260382 0.059767717 0.061362239 0.062139607 0.062936303 0.064325636 0.064581633 0.065105463 0.066055612 0.067571517 0.067923672 0.068998928 0.070524396 0.072113949 0.072496379 0.072861192 0.072975041 0.074083985 0.078747226 0.080835392 0.081914525 0.083346282 0.084555638 0.086235821 0.088995965 0.089425516 0.089837568 0.091324560 0.093335112 0.094581182 0.095498765 0.096288402 0.096864168 0.098529497 0.100166350 0.100705248 0.102755250 0.103967104 0.104535539 0.106780579 0.109199881 0.111031352 0.112310232 0.112871534 0.113948413 0.114830336 0.117001634 0.117387687 0.118644854 0.119252013 0.120669491 0.122300068 0.125137250 0.125879765 0.128553712 0.129028529 0.131053219 0.133841678 0.136524477 0.137790375 0.138620254 0.139653126 0.140539317 0.143508014 0.144650911 0.145925544 0.146809787 0.152000580 0.153618620 0.154205742 0.160416155 0.160892835 0.168578069 0.171463647 0.176067853 0.179112971 0.181634098 0.184507854 0.189133995 0.190239594 0.191983585 0.201358324 0.202237261 0.206296152 0.206967697 0.207268889 0.212408277 0.212588473 0.215635402 0.217007275 0.220463429 0.220969452 0.224606416 0.225144487 0.227126698 0.231889071 0.234596754 0.235959035 0.238580228 0.246384007 0.248845700 0.252482665 0.256564686 0.257230132 0.258327191 0.262583978 0.271581643 0.282928791 0.292035687 0.300102829 0.300181304 0.301080690 0.307145000 0.307795297 0.309855125 0.320040554 0.321366665 0.326465881 0.330825808 0.336678811 0.347773311 0.352035513 0.355655572 0.360902210 0.362075971 0.364154331 0.384577551 0.407233863 0.414485189 0.430278157 0.432012283 0.435397423 0.451112762 0.464744919 0.475688853 0.478865836 0.480458542 0.486642810 0.498904347 0.503966611 0.515233419 0.518073328 0.543842470 0.566940619 0.567734023 0.586741279 0.592105112 0.605885519 0.644267992 0.645538782 0.668087935 0.675661501 0.687421685 0.704120232 0.704353329 0.705057102 0.710922878 0.717275349 0.734274385 0.738033347 0.739783504 0.747385740 0.750843836 0.771616585 0.775989797 0.809156512 0.821851950 0.824148200 0.828942816 0.834305502 0.848030303 0.849536024 0.851413564 0.854639372 0.863466213 0.867473812 0.875937455 0.887562475 0.891143122 0.892444685 0.893645508 0.902132954 0.910333720 0.918054877 0.923109831 0.924582101 0.932019962 0.935800946 0.956138133 0.962929332 0.965326015 0.970101694 0.977878848 0.982596976 0.998657594 1.013028771 1.016300942 1.021925678 1.040216481 1.055124353 1.071300286 1.073102526 1.079687420 1.087407683 1.108542844 1.110438576 1.118274047 1.119228660 1.122635587 1.123981408 1.141898531 1.149707748 1.161768345 1.170198187 1.177300905 1.188440604 1.200773904 1.222106784 1.234194211 1.258226741 1.296494446 1.298369445 1.314746281 1.326484899 1.327553043 1.330260641 1.331436565 1.334803228 1.342455290 1.349193473 1.368610515 1.380013620 1.381339805 1.381880370 1.429630221 1.516273340 1.557996864 1.684831575 1.922998894</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">270</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92335306" y3="-0.95458463" z3="-0.6764731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60831485" y3="-1.95058238" z3="-1.53964696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09074281" y3="-0.99611574" z3="-1.40303315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77996422" y3="1.47732707" z3="-1.0608448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29190022" y3="0.31120431" z3="-0.49647263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65949741" y3="2.73531434" z3="-1.15702372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00825517" y3="2.73510306" z3="-0.84788417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37876075" y3="4.99473793" z3="-0.39007374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81062232" y3="3.85033331" z3="-0.89815889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75153361" y3="5.87109631" z3="-0.19803328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0961654" y3="1.60765338" z3="-1.67964979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13092805" y3="0.35822573" z3="0.22006058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71805758" y3="0.38176936" z3="-0.63914176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61199341" y3="0.73210024" z3="0.28663535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67029367" y3="-0.85995142" z3="-1.50146519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09342019" y3="-2.47269014" z3="-1.32240667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01924778" y3="-5.48315554" z3="-6.27840849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75189865" y3="-5.0494597" z3="-5.31054309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05125999" y3="-3.91081982" z3="-2.85294198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71898673" y3="-3.66905133" z3="-5.16211503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46311198" y3="-5.87702925" z3="-4.22259011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12723614" y3="-5.30161856" z3="-3.00348155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37768713" y3="-3.06810856" z3="-3.94000456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95137973" y3="-3.00107968" z3="-5.99521166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51321845" y3="-6.96468228" z3="-4.31727212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93978202" y3="-5.93539138" z3="-2.13249393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64896245" y3="-3.36354767" z3="-1.60775728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35194244" y3="-3.84540483" z3="-0.86239579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6971255" y3="-4.84678665" z3="-1.13316694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38488713" y3="-3.547682" z3="0.58724697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41747837" y3="-3.08193992" z3="3.34780684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69583394" y3="-4.58442264" z3="1.47596486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10910298" y3="-2.27353018" z3="1.09230661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12229015" y3="-2.04303779" z3="2.46371977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7037353" y3="-4.35365815" z3="2.8504214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88929495" y3="-5.59152315" z3="1.09329771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10255138" y3="-1.43175114" z3="0.43173384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10752733" y3="-1.03723615" z3="2.82605077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91296296" y3="-5.17951544" z3="3.53518896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41710511" y3="-2.90443492" z3="4.42724713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33069607" y3="-1.73226405" z3="-3.90835316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46820206" y3="-1.32897948" z3="-3.00553703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34105315" y3="3.70683127" z3="-1.06012477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13485912" y3="-2.97247346" z3="-1.70762924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92185502" y3="-3.15551462" z3="-0.56618334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10960936" y3="-2.28789764" z3="0.37343524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83720122" y3="-0.72408088" z3="0.64081156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7303651" y3="-0.26601878" z3="-0.93157868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52618525" y3="0.4607913" z3="1.20379968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.04954083" y3="-1.0673306" z3="2.02423452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40928605" y3="-4.36688859" z3="-0.33978801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12762109" y3="-4.61304994" z3="0.85979817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04555439" y3="0.01039556" z3="-1.74863395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37782847" y3="0.60971666" z3="-0.74368846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37249086" y3="-1.09389269" z3="-1.28295317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64785453" y3="0.56719585" z3="0.54145309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14555129" y3="0.16131736" z3="2.19574703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99903802" y3="1.45507059" z3="1.30752905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51120607" y3="-0.12201006" z3="2.36254607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86375186" y3="-1.74234303" z3="1.70688206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.53815564" y3="-1.52214863" z3="2.8912595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06333582" y3="-4.03045699" z3="0.87873954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5168675" y3="-4.3644088" z3="1.74145517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3596868" y3="-5.68612021" z3="0.84700831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28278603" y3="-2.1965507" z3="-0.17017852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13713452" y3="-3.29157447" z3="-1.03412171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49032313" y3="-4.44993675" z3="-0.6205047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99453982" y3="-4.50843307" z3="0.67649916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14598831" y3="-3.45253716" z3="1.57038511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78329065" y3="-2.29635709" z3="1.13805326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49348158" y3="-3.21821924" z3="-2.06487744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34625697" y3="-5.2883193" z3="-1.30259716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25464629" y3="-5.6964603" z3="1.10421123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73974465" y3="-3.53561587" z3="2.57948401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87897751" y3="-1.4502941" z3="1.8201699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49326531" y3="4.02325688" z3="0.020516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86337981" y3="3.80679964" z3="-0.04549215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39666783" y3="3.2725073" z3="-1.21339335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60157639" y3="2.97923971" z3="-2.31839362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23209286" y3="3.19456389" z3="-2.23323451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05205767" y3="4.39791987" z3="0.94725158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5152073" y3="4.02331943" z3="0.80156888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83086383" y3="2.9788466" z3="-1.27078909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05716294" y3="2.5729717" z3="-3.22214484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40551559" y3="2.93972143" z3="-3.08156517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1593546" y3="-5.91002713" z3="2.29175796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76081509" y3="-6.39647611" z3="0.23907363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30934514" y3="2.68555537" z3="-2.34525594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46179753" y3="3.02735826" z3="-0.2314716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63251372" y3="0.16424817" z3="-2.01395717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9559072" y3="1.4110785" z3="-1.87757839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81469746" y3="0.09290259" z3="-2.80156162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2933219" y3="1.20012497" z3="-3.45692491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3306105" y3="-0.86847495" z3="-2.88627479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20019967" y3="1.13301636" z3="-4.06427038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45994659" y3="2.53146099" z3="-2.59602373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59670465" y3="2.42882861" z3="-3.36138597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92797678" y3="3.48341305" z3="-2.54208605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96264797" y3="3.30324141" z3="-3.90693035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57940526" y3="3.90839828" z3="-0.25329043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75907813" y3="5.05943865" z3="-0.06673707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9276508" y3="3.96520602" z3="0.19959815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44229884" y3="5.11347983" z3="0.75201582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55831296" y3="3.07869754" z3="0.11061007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4811695" y3="5.13113994" z3="1.09338606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32427767" y3="6.23758942" z3="0.49516247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6385776" y3="6.27059717" z3="0.89007981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68543088" y3="7.11756003" z3="0.6186888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06186211" y3="7.18049363" z3="1.32462355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35556683" y3="-3.91101551" z3="-2.87736476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53805428" y3="-4.94910815" z3="-2.55942552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22860443" y3="-3.58161418" z3="-3.4720437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48121728" y3="-3.90076867" z3="-3.5473224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69454302" y3="-1.58297273" z3="-2.08181751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43048025" y3="-1.10273495" z3="-2.75216041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52829889" y3="-0.92732539" z3="-1.21284495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74560068" y3="-1.62500702" z3="-2.64037438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9234,-.9546,-.6765;6.6083,-1.9506,-1.5396;6.0907,-.9961,-1.403;4.78,1.4773,-1.0608;4.2919,.3112,-.4965;2.6595,2.7353,-1.157;4.0083,2.7351,-.8479;2.3788,4.9947,-.3901;1.8106,3.8503,-.8982;1.7515,5.8711,-.198;2.0962,1.6077,-1.6796;3.1309,.3582,.2201;1.7181,.3818,-.6391;.612,.7321,.2866;1.6703,-.86,-1.5015;1.0934,-2.4727,-1.3224;2.0192,-5.4832,-6.2784;1.7519,-5.0495,-5.3105;1.0513,-3.9108,-2.8529;1.719,-3.6691,-5.1621;1.4631,-5.877,-4.2226;1.1272,-5.3016,-3.0035;1.3777,-3.0681,-3.94;1.9514,-3.0011,-5.9952;1.5132,-6.9647,-4.3173;.9398,-5.9354,-2.1325;.649,-3.3635,-1.6078;-.3519,-3.8454,-.8624;-.6971,-4.8468,-1.1332;-.3849,-3.5477,.5872;-.4175,-3.0819,3.3478;-.6958,-4.5844,1.476;-.1091,-2.2735,1.0923;-.1223,-2.043,2.4637;-.7037,-4.3537,2.8504;-.8893,-5.5915,1.0933;.1026,-1.4318,.4317;.1075,-1.0372,2.8261;-.913,-5.1795,3.5352;-.4171,-2.9044,4.4272;1.3307,-1.7323,-3.9084;1.4682,-1.329,-3.0055;.3411,3.7068,-1.0601;-2.1349,-2.9725,-1.7076;-2.9219,-3.1555,-.5662;-3.1096,-2.2879,.3734;-3.8372,-.7241,.6408;-4.7304,-.266,-.9316;-2.5262,.4608,1.2038;-5.0495,-1.0673,2.0242;-3.4093,-4.3669,-.3398;-4.1276,-4.613,.8598;-4.0456,.0104,-1.7486;-5.3778,.6097,-.7437;-5.3725,-1.0939,-1.283;-1.6479,.5672,.5415;-2.1456,.1613,2.1957;-2.999,1.4551,1.3075;-5.5112,-.122,2.3625;-5.8638,-1.7423,1.7069;-4.5382,-1.5221,2.8913;-5.0633,-4.0305,.8787;-3.5169,-4.3644,1.7415;-4.3597,-5.6861,.847;4.2828,-2.1966,-.1702;4.1371,-3.2916,-1.0341;3.4903,-4.4499,-.6205;2.9945,-4.5084,.6765;3.146,-3.4525,1.5704;3.7833,-2.2964,1.1381;4.4935,-3.2182,-2.0649;3.3463,-5.2883,-1.3026;2.2546,-5.6965,1.1042;2.7397,-3.5356,2.5795;3.879,-1.4503,1.8202;-.4933,4.0233,.0205;-1.8634,3.8068,-.0455;-2.3967,3.2725,-1.2134;-1.6016,2.9792,-2.3184;-.2321,3.1946,-2.2332;-.0521,4.3979,.9473;-2.5152,4.0233,.8016;-3.8309,2.9788,-1.2708;-2.0572,2.573,-3.2221;.4055,2.9397,-3.0816;2.1594,-5.91,2.2918;1.7608,-6.3965,.2391;-4.3093,2.6856,-2.3453;-4.4618,3.0274,-.2315;6.6325,.1642,-2.014;5.9559,1.4111,-1.8776;7.8147,.0929,-2.8016;8.2933,1.2001,-3.4569;8.3306,-.8685,-2.8863;9.2002,1.133,-4.0643;6.4599,2.5315,-2.596;7.5967,2.4288,-3.3614;5.928,3.4834,-2.5421;7.9626,3.3032,-3.9069;4.5794,3.9084,-.2533;3.7591,5.0594,-.0667;5.9277,3.9652,.1996;6.4423,5.1135,.752;6.5583,3.0787,.1106;7.4812,5.1311,1.0934;4.3243,6.2376,.4952;5.6386,6.2706,.8901;3.6854,7.1176,.6187;6.0619,7.1805,1.3246;-2.3556,-3.911,-2.8774;-2.5381,-4.9491,-2.5594;-3.2286,-3.5816,-3.472;-1.4812,-3.9008,-3.5473;-1.6945,-1.583,-2.0818;-2.4305,-1.1027,-2.7522;-1.5283,-.9273,-1.2128;-.7456,-1.625,-2.6404;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662927896494</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000886712531 0.000105547864 0.019562547913 0.005144699043</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057124258 -0.000035010 0.000039900 0.000140334 0.000311248 0.000361194 0.000425425 0.000556664 0.000668823 0.000809748 0.000978061 0.001035059 0.001195676 0.001304408 0.001423355 0.001524185 0.001678444 0.001779991 0.002006369 0.002246232 0.002486086 0.002592682 0.002877938 0.003027195 0.003515282 0.003672233 0.003940584 0.004568110 0.004811998 0.004999377 0.005184888 0.005375896 0.006056885 0.006436329 0.006509637 0.006907191 0.007101191 0.007403337 0.008186433 0.008733630 0.008854215 0.009562298 0.009834374 0.009901769 0.010980266 0.011185163 0.011904978 0.012611350 0.013378581 0.013773866 0.013989231 0.014626055 0.014928285 0.015445892 0.015895897 0.016458464 0.016668507 0.018624209 0.019340397 0.019428085 0.020276563 0.020577638 0.021555216 0.021822881 0.022466908 0.022802955 0.023493066 0.023820210 0.024524303 0.025904719 0.026656079 0.026950214 0.027181288 0.027525393 0.028349641 0.029047338 0.030961334 0.031278479 0.031591684 0.034169246 0.034760512 0.036034941 0.039058101 0.039538698 0.041987710 0.045423658 0.046145709 0.046787364 0.048880713 0.049699572 0.050030568 0.050845852 0.051545945 0.052192893 0.052289205 0.052414238 0.053000944 0.053628260 0.055005906 0.056111507 0.056443882 0.056729897 0.057018420 0.057236953 0.057796001 0.058628733 0.059260306 0.059767887 0.061361986 0.062143091 0.062936613 0.064324379 0.064582504 0.065105922 0.066054904 0.067579130 0.067920306 0.069000272 0.070525380 0.072106287 0.072487116 0.072870426 0.072976301 0.074060969 0.078743286 0.080827529 0.081915311 0.083340408 0.084538036 0.085971101 0.088994758 0.089426868 0.089837708 0.091324892 0.093335238 0.094581522 0.095498902 0.096291162 0.096864296 0.098529807 0.100165279 0.100705501 0.102756494 0.103976255 0.104537684 0.106802119 0.109205412 0.111038240 0.112313733 0.112875040 0.113949030 0.114836107 0.117005142 0.117387018 0.118643665 0.119254905 0.120670933 0.122295737 0.125133509 0.125881548 0.128554558 0.129029018 0.131053212 0.133847606 0.136532478 0.137791776 0.138619975 0.139655042 0.140531364 0.143498443 0.144642834 0.145924215 0.146810363 0.152001811 0.153617979 0.154198346 0.160416035 0.160891113 0.168579675 0.171463655 0.176076039 0.179114376 0.181634348 0.184510825 0.189134840 0.190250623 0.191988566 0.201358699 0.202238143 0.206298648 0.206967830 0.207268845 0.212415949 0.212589316 0.215635755 0.217007213 0.220462128 0.220970178 0.224610736 0.225144409 0.227134123 0.231890259 0.234598662 0.235973129 0.238580897 0.246383825 0.248841971 0.252496681 0.256565287 0.257230474 0.258330008 0.262584019 0.271581692 0.282929821 0.292035777 0.300110887 0.300188764 0.301082686 0.307145104 0.307795450 0.309855325 0.320045697 0.321366683 0.326466691 0.330845668 0.336678956 0.347774671 0.352036123 0.355656098 0.360904240 0.362086386 0.364154806 0.384578416 0.407239526 0.414485508 0.430278802 0.432011335 0.435401851 0.451123516 0.464751550 0.475690336 0.478866283 0.480464772 0.486634481 0.498904444 0.503960316 0.515232898 0.518075092 0.543842084 0.566940759 0.567736342 0.586752069 0.592096608 0.605892077 0.644273192 0.645542857 0.668090289 0.675659779 0.687423878 0.704132557 0.704353301 0.705055351 0.710995748 0.717276589 0.734282897 0.738034224 0.739781924 0.747382379 0.750844594 0.771616717 0.775989859 0.809160760 0.821853045 0.824148850 0.828943005 0.834305882 0.848052807 0.849539569 0.851413923 0.854641202 0.863469214 0.867474068 0.875938786 0.887563381 0.891144978 0.892444556 0.893647153 0.902132984 0.910333111 0.918050305 0.923112802 0.924582038 0.932020067 0.935818115 0.956146372 0.962926508 0.965333212 0.970101866 0.977873356 0.982597406 0.998658348 1.013026491 1.016305864 1.021926395 1.040218656 1.055125886 1.071300678 1.073116379 1.079712148 1.087408974 1.108543887 1.110438748 1.118277274 1.119231169 1.122635640 1.123981670 1.141899505 1.149713327 1.161768479 1.170198567 1.177302609 1.188465896 1.200773984 1.222116653 1.234201820 1.258230871 1.296496683 1.298378028 1.314746985 1.326484885 1.327552321 1.330261823 1.331436636 1.334803301 1.342455837 1.349198570 1.368661169 1.380013642 1.381340790 1.381881544 1.429629078 1.516183958 1.557996328 1.684836607 1.922997898</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">271</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92167925" y3="-0.95480345" z3="-0.68211969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60612465" y3="-1.95022158" z3="-1.54696082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08874475" y3="-0.9958211" z3="-1.40922208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7790228" y3="1.4775687" z3="-1.06347678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29040666" y3="0.31087036" z3="-0.50086886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65920518" y3="2.73649273" z3="-1.15807574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00778784" y3="2.73522662" z3="-0.84824261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37838627" y3="4.99350264" z3="-0.3839745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81038409" y3="3.85085774" z3="-0.89614906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75113025" y3="5.86910518" z3="-0.18962042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09605041" y3="1.60986847" z3="-1.68343772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12920428" y3="0.35738886" z3="0.21526238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71658718" y3="0.3831286" z3="-0.64434829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61083232" y3="0.73400741" z3="0.28166007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66764341" y3="-0.85806583" z3="-1.5073526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09312209" y3="-2.4724898" z3="-1.3247081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01421824" y3="-5.49262996" z3="-6.27584319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74803297" y3="-5.05711816" z3="-5.30848371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05027732" y3="-3.91391265" z3="-2.85222994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71574598" y3="-3.67644639" z3="-5.16240652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46005256" y3="-5.8826799" z3="-4.21883078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12561046" y3="-5.30499657" z3="-3.00044172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37584589" y3="-3.07318285" z3="-3.94103672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9474706" y3="-3.01002367" z3="-5.99689193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50961891" y3="-6.97051925" z3="-4.31166894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93880483" y3="-5.93723749" z3="-2.12825589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64916884" y3="-3.36430918" z3="-1.60769497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.35025958" y3="-3.84559259" z3="-0.85995554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69490924" y3="-4.84789019" z3="-1.12785962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38181562" y3="-3.5439245" z3="0.58884851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40882577" y3="-3.06960228" z3="3.34790388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68907509" y3="-4.57842923" z3="1.48127267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10748253" y3="-2.26759217" z3="1.08939829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11788077" y3="-2.03269154" z3="2.46001536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69426241" y3="-4.34326939" z3="2.85500261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88220834" y3="-5.58647308" z3="1.10183264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10098012" y3="-1.42752474" z3="0.42581511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11115849" y3="-1.02545779" z3="2.81860932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90018976" y3="-5.16742869" z3="3.54304341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40631089" y3="-2.88872489" z3="4.42675707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32926804" y3="-1.73727734" z3="-3.9118579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46630475" y3="-1.3318652" z3="-3.00992707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34077812" y3="3.70798683" z3="-1.05822831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13542773" y3="-2.97677129" z3="-1.70696553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92107249" y3="-3.15747206" z3="-0.56433997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11019188" y3="-2.28658703" z3="0.37210708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83855403" y3="-0.722515" z3="0.63465047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72443663" y3="-0.26252979" z3="-0.94133166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52825362" y3="0.46049756" z3="1.20306682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05762413" y3="-1.06451328" z3="2.01247663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40602151" y3="-4.36897389" z3="-0.33324809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12278734" y3="-4.61201506" z3="0.86782641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03632951" y3="0.02375853" z3="-1.75215495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37912953" y3="0.60758431" z3="-0.75227741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35834674" y3="-1.09245624" z3="-1.30251572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64909889" y3="0.56785102" z3="0.54191017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14915563" y3="0.15788451" z3="2.19474605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.0006468" y3="1.4547113" z3="1.3092709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51769609" y3="-0.11847154" z3="2.35107908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87261256" y3="-1.73635366" z3="1.69038893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55083881" y3="-1.52265413" z3="2.88045593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05951923" y3="-4.03111635" z3="0.88562746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51175779" y3="-4.35903914" z3="1.74803506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35264789" y3="-5.68572795" z3="0.8593569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28183215" y3="-2.1968516" z3="-0.17517911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13645508" y3="-3.29271413" z3="-1.03810387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49098555" y3="-4.45130371" z3="-0.62296713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99613316" y3="-4.50904796" z3="0.6744278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14722967" y3="-3.45221787" z3="1.56727847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78328462" y3="-2.29596208" z3="1.13349303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4920604" y3="-3.22000721" z3="-2.06916363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34725634" y3="-5.29044957" z3="-1.30421369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25767912" y3="-5.69731019" z3="1.10386778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74172247" y3="-3.53469325" z3="2.57672705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87882901" y3="-1.44929802" z3="1.81484281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4926324" y3="4.0193911" z3="0.02456617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86284675" y3="3.80389236" z3="-0.0414217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3971236" y3="3.27461824" z3="-1.2111284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60297747" y3="2.98628102" z3="-2.31815004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23343781" y3="3.20151181" z3="-2.23332681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05056539" y3="4.38966324" z3="0.95263969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51403458" y3="4.01730624" z3="0.80689158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83166751" y3="2.9827457" z3="-1.26921847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05936333" y3="2.58434407" z3="-3.22346628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4027773" y3="2.95195722" z3="-3.08403605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16446711" y3="-5.91039902" z3="2.29169542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76282081" y3="-6.3980032" z3="0.239866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3096844" y3="2.68927347" z3="-2.34383407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46349074" y3="3.03333152" z3="-0.23054572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63076033" y3="0.16515744" z3="-2.01879762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95495861" y3="1.412153" z3="-1.88014289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81268612" y3="0.09455395" z3="-2.80681334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29190832" y3="1.20272278" z3="-3.46013956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32797953" y3="-0.86695913" z3="-2.8934617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19858634" y3="1.13617144" z3="-4.06781243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45972162" y3="2.5336647" z3="-2.59627515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59628236" y3="2.43175672" z3="-3.36199341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92842963" y3="3.48586669" z3="-2.54025314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96285158" y3="3.30699227" z3="-3.90578085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57878553" y3="3.90641771" z3="-0.24947139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75844155" y3="5.05688187" z3="-0.0592992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92664871" y3="3.96120656" z3="0.20484474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44079968" y3="5.10705184" z3="0.76269534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55734786" y3="3.07495463" z3="0.11281103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47927514" y3="5.12309263" z3="1.10539558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3232078" y3="6.23260157" z3="0.5080305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63703267" y3="6.26365285" z3="0.90475868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68432512" y3="7.11213049" z3="0.63460681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05986817" y3="7.17154462" z3="1.34383839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35568495" y3="-3.91916156" z3="-2.87370279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53664345" y3="-4.95642536" z3="-2.55254166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22957233" y3="-3.59274307" z3="-3.46872059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48196792" y3="-3.90994199" z3="-3.54446135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69687778" y3="-1.58776595" z3="-2.08538626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43372564" y3="-1.10994158" z3="-2.7563486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53061673" y3="-0.92955035" z3="-1.21828204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7481321" y3="-1.63037" z3="-2.64429311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9217,-.9548,-.6821;6.6061,-1.9502,-1.547;6.0887,-.9958,-1.4092;4.779,1.4776,-1.0635;4.2904,.3109,-.5009;2.6592,2.7365,-1.1581;4.0078,2.7352,-.8482;2.3784,4.9935,-.384;1.8104,3.8509,-.8961;1.7511,5.8691,-.1896;2.0961,1.6099,-1.6834;3.1292,.3574,.2153;1.7166,.3831,-.6443;.6108,.734,.2817;1.6676,-.8581,-1.5074;1.0931,-2.4725,-1.3247;2.0142,-5.4926,-6.2758;1.748,-5.0571,-5.3085;1.0503,-3.9139,-2.8522;1.7157,-3.6764,-5.1624;1.4601,-5.8827,-4.2188;1.1256,-5.305,-3.0004;1.3758,-3.0732,-3.941;1.9475,-3.01,-5.9969;1.5096,-6.9705,-4.3117;.9388,-5.9372,-2.1283;.6492,-3.3643,-1.6077;-.3503,-3.8456,-.86;-.6949,-4.8479,-1.1279;-.3818,-3.5439,.5888;-.4088,-3.0696,3.3479;-.6891,-4.5784,1.4813;-.1075,-2.2676,1.0894;-.1179,-2.0327,2.46;-.6943,-4.3433,2.855;-.8822,-5.5865,1.1018;.101,-1.4275,.4258;.1112,-1.0255,2.8186;-.9002,-5.1674,3.543;-.4063,-2.8887,4.4268;1.3293,-1.7373,-3.9119;1.4663,-1.3319,-3.0099;.3408,3.708,-1.0582;-2.1354,-2.9768,-1.707;-2.9211,-3.1575,-.5643;-3.1102,-2.2866,.3721;-3.8386,-.7225,.6347;-4.7244,-.2625,-.9413;-2.5283,.4605,1.2031;-5.0576,-1.0645,2.0125;-3.406,-4.369,-.3332;-4.1228,-4.612,.8678;-4.0363,.0238,-1.7522;-5.3791,.6076,-.7523;-5.3583,-1.0925,-1.3025;-1.6491,.5679,.5419;-2.1492,.1579,2.1947;-3.0006,1.4547,1.3093;-5.5177,-.1185,2.3511;-5.8726,-1.7364,1.6904;-4.5508,-1.5227,2.8805;-5.0595,-4.0311,.8856;-3.5118,-4.359,1.748;-4.3526,-5.6857,.8594;4.2818,-2.1969,-.1752;4.1365,-3.2927,-1.0381;3.491,-4.4513,-.623;2.9961,-4.509,.6744;3.1472,-3.4522,1.5673;3.7833,-2.296,1.1335;4.4921,-3.22,-2.0692;3.3473,-5.2904,-1.3042;2.2577,-5.6973,1.1039;2.7417,-3.5347,2.5767;3.8788,-1.4493,1.8148;-.4926,4.0194,.0246;-1.8628,3.8039,-.0414;-2.3971,3.2746,-1.2111;-1.603,2.9863,-2.3182;-.2334,3.2015,-2.2333;-.0506,4.3897,.9526;-2.514,4.0173,.8069;-3.8317,2.9827,-1.2692;-2.0594,2.5843,-3.2235;.4028,2.952,-3.084;2.1645,-5.9104,2.2917;1.7628,-6.398,.2399;-4.3097,2.6893,-2.3438;-4.4635,3.0333,-.2305;6.6308,.1652,-2.0188;5.955,1.4122,-1.8801;7.8127,.0946,-2.8068;8.2919,1.2027,-3.4601;8.328,-.867,-2.8935;9.1986,1.1362,-4.0678;6.4597,2.5337,-2.5963;7.5963,2.4318,-3.362;5.9284,3.4859,-2.5403;7.9629,3.307,-3.9058;4.5788,3.9064,-.2495;3.7584,5.0569,-.0593;5.9266,3.9612,.2048;6.4408,5.1071,.7627;6.5573,3.075,.1128;7.4793,5.1231,1.1054;4.3232,6.2326,.508;5.637,6.2637,.9048;3.6843,7.1121,.6346;6.0599,7.1715,1.3438;-2.3557,-3.9192,-2.8737;-2.5366,-4.9564,-2.5525;-3.2296,-3.5927,-3.4687;-1.482,-3.9099,-3.5445;-1.6969,-1.5878,-2.0854;-2.4337,-1.1099,-2.7563;-1.5306,-.9296,-1.2183;-.7481,-1.6304,-2.6443;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929891942</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000397594185 0.000058411100 0.017930588092 0.005398237626</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123086 -0.000010340 0.000074158 0.000148972 0.000276541 0.000375695 0.000394674 0.000536768 0.000661816 0.000795677 0.000958008 0.001030158 0.001195463 0.001303745 0.001422639 0.001519769 0.001649386 0.001775720 0.002002825 0.002181017 0.002410043 0.002565898 0.002847940 0.003027333 0.003446755 0.003665452 0.003926208 0.004529770 0.004807979 0.004969885 0.005190006 0.005365571 0.006044735 0.006429009 0.006470372 0.006888671 0.007079364 0.007393701 0.008184318 0.008728115 0.008836555 0.009506773 0.009780227 0.009880861 0.010953275 0.011176533 0.011899417 0.012610129 0.013377781 0.013750951 0.013990449 0.014625673 0.014913032 0.015426698 0.015897402 0.016342252 0.016662116 0.018626211 0.019291690 0.019417284 0.020224733 0.020546574 0.021551198 0.021776849 0.022453880 0.022802436 0.023491760 0.023812364 0.024524950 0.025903889 0.026634888 0.026950254 0.027161229 0.027520470 0.028350901 0.029009113 0.030885076 0.030976088 0.031585724 0.034171989 0.034762469 0.036029671 0.039058729 0.039536105 0.041986624 0.045423207 0.046141303 0.046771425 0.048860410 0.049698937 0.050034423 0.050842189 0.051546178 0.052192252 0.052289222 0.052414350 0.053007900 0.053628223 0.055001445 0.056111397 0.056444120 0.056729129 0.057017891 0.057199478 0.057794176 0.058627927 0.059261424 0.059766945 0.061360052 0.062146131 0.062938158 0.064320409 0.064582391 0.065106992 0.066043896 0.067576031 0.067899072 0.069001260 0.070523781 0.072030748 0.072415661 0.072843589 0.072979462 0.073750800 0.078704137 0.080758821 0.081902007 0.083263978 0.084226312 0.084749677 0.088978314 0.089426730 0.089831745 0.091322630 0.093336020 0.094581799 0.095499090 0.096294915 0.096864139 0.098529366 0.100153414 0.100704851 0.102757789 0.103972856 0.104551028 0.106813849 0.109208688 0.111040315 0.112312854 0.112871274 0.113949986 0.114821727 0.117009067 0.117372183 0.118631896 0.119236431 0.120673315 0.122271399 0.125113502 0.125876813 0.128555002 0.129029393 0.131051204 0.133854351 0.136534298 0.137791514 0.138612885 0.139655674 0.140481936 0.143451134 0.144616858 0.145912417 0.146810449 0.151997017 0.153612743 0.154161226 0.160239892 0.160875427 0.168574851 0.171462932 0.176077132 0.179114597 0.181632646 0.184512825 0.189130084 0.190264801 0.191988513 0.201356348 0.202237899 0.206298244 0.206967225 0.207268750 0.212417203 0.212588982 0.215632325 0.216996081 0.220436968 0.220966115 0.224613597 0.225142949 0.227141384 0.231890573 0.234599521 0.235982445 0.238579811 0.246373900 0.248754824 0.252514261 0.256564246 0.257230113 0.258329495 0.262580162 0.271581798 0.282930747 0.292035261 0.300111751 0.300183652 0.301082718 0.307145076 0.307795748 0.309855187 0.320027226 0.321366739 0.326465251 0.330865445 0.336678790 0.347771774 0.352033897 0.355654201 0.360877433 0.362099626 0.364155565 0.384574832 0.407238029 0.414484844 0.430277258 0.431937644 0.435396690 0.451124612 0.464750166 0.475689986 0.478866318 0.480462816 0.486576102 0.498904200 0.503923128 0.515223875 0.518067645 0.543832133 0.566938402 0.567735590 0.586753321 0.591983080 0.605887904 0.644253145 0.645539793 0.668090329 0.675645069 0.687422950 0.704121100 0.704334730 0.704710930 0.710984258 0.717276243 0.734284279 0.738034452 0.739772249 0.747306812 0.750844887 0.771616733 0.775989551 0.809160607 0.821852712 0.824149772 0.828942918 0.834304618 0.848065324 0.849539900 0.851413441 0.854643414 0.863471422 0.867474033 0.875938679 0.887550095 0.891140417 0.892395754 0.893642679 0.902130974 0.910325304 0.918024469 0.922995499 0.924577739 0.932019597 0.935811781 0.956132009 0.962895164 0.965331686 0.970091310 0.977744132 0.982592448 0.998658320 1.012992445 1.016306704 1.021925921 1.040218058 1.055125922 1.071297739 1.073114089 1.079712466 1.087408746 1.108543854 1.110438765 1.118278246 1.119231863 1.122635428 1.123981034 1.141898648 1.149716926 1.161768385 1.170197943 1.177301320 1.188478649 1.200773850 1.222116971 1.234199460 1.258230962 1.296496183 1.298377213 1.314746701 1.326483561 1.327536150 1.330259219 1.331433628 1.334802355 1.342457599 1.349204644 1.368673701 1.380013098 1.381340337 1.381881264 1.429609764 1.514947758 1.557993041 1.684835457 1.922969954</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">272</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91925925" y3="-0.95486944" z3="-0.6802295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60239342" y3="-1.95158742" z3="-1.54622513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08529106" y3="-0.99695613" z3="-1.40901366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77659885" y3="1.47711465" z3="-1.06445284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28869742" y3="0.31126138" z3="-0.49940683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65718508" y3="2.73727733" z3="-1.1554137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00655547" y3="2.73547114" z3="-0.84906397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38011815" y3="4.99593612" z3="-0.38454801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81001114" y3="3.8527629" z3="-0.89308948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75404819" y3="5.87224491" z3="-0.19045824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09165352" y3="1.61063483" z3="-1.6780666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12897388" y3="0.35915815" z3="0.21901661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71462337" y3="0.38431249" z3="-0.63764868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6106117" y3="0.73481285" z3="0.29050993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66423384" y3="-0.85702679" z3="-1.50036203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09362894" y3="-2.47235525" z3="-1.32108533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02953194" y3="-5.48686261" z3="-6.27256613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76043965" y3="-5.05266058" z3="-5.30543532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05556735" y3="-3.91275139" z3="-2.84968365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72680072" y3="-3.67223283" z3="-5.15787625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47002474" y3="-5.87963387" z3="-4.21751772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13204361" y3="-5.30357648" z3="-2.99935567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38330341" y3="-3.07057062" z3="-3.93672947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9602681" y3="-3.00465973" z3="-5.99093412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52052142" y3="-6.96729916" z3="-4.31146898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94333506" y3="-5.93697207" z3="-2.12844216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65161073" y3="-3.36481335" z3="-1.60538806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34850524" y3="-3.84782498" z3="-0.85962935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69182296" y3="-4.85015761" z3="-1.12890952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38289794" y3="-3.54710808" z3="0.58930358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41588082" y3="-3.07428548" z3="3.34838918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6912689" y3="-4.58234821" z3="1.48033342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11050164" y3="-2.27060528" z3="1.09109708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12391108" y3="-2.03646968" z3="2.46181966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69931562" y3="-4.34805378" z3="2.85420039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88381251" y3="-5.5892719" z3="1.09929903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09912262" y3="-1.43019218" z3="0.42833092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10379215" y3="-1.02944475" z3="2.82164347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90566988" y3="-5.17290515" z3="3.54159465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41561109" y3="-2.89415617" z3="4.42737635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33579836" y3="-1.73475449" z3="-3.90644081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46929198" y3="-1.32982681" z3="-3.00369041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33989765" y3="3.71088049" z3="-1.05151346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13342934" y3="-2.97984138" z3="-1.70934796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92094015" y3="-3.16001397" z3="-0.56799452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11215575" y3="-2.28804113" z3="0.36718674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83889117" y3="-0.72347103" z3="0.62983729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71808031" y3="-0.2579811" z3="-0.94823675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52860746" y3="0.45562379" z3="1.20606509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06471642" y3="-1.06620783" z3="2.00149444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40640581" y3="-4.37117392" z3="-0.33722128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12497397" y3="-4.61312047" z3="0.86284253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02710137" y3="0.03257551" z3="-1.75501596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37468616" y3="0.6103748" z3="-0.75795963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34969965" y3="-1.08709421" z3="-1.31545662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64625103" y3="0.56208492" z3="0.54897935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15488439" y3="0.15035421" z3="2.19898777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99927114" y3="1.45062699" z3="1.31184021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52465424" y3="-0.11994831" z3="2.33943553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87941083" y3="-1.73599765" z3="1.67440328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56293484" y3="-1.52681377" z3="2.87094129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06093317" y3="-4.03106548" z3="0.87950425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.514933" y3="-4.36066447" z3="1.74389015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35572105" y3="-5.68683386" z3="0.85434766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27988112" y3="-2.19663675" z3="-0.1719469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13644996" y3="-3.29369573" z3="-1.03373902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49178254" y3="-4.45253031" z3="-0.61799892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99542551" y3="-4.50928265" z3="0.67884008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14456622" y3="-3.45127028" z3="1.57065834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78008965" y3="-2.29486729" z3="1.13635025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49294697" y3="-3.22185244" z3="-2.06454506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34976913" y3="-5.2926526" z3="-1.29843178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25732089" y3="-5.69774841" z3="1.10850457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73802674" y3="-3.53302027" z3="2.57975334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87421252" y3="-1.44754092" z3="1.81698089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49044615" y3="4.02078386" z3="0.03398136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86096284" y3="3.80629036" z3="-0.02866705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39868041" y3="3.28055043" z3="-1.19831349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60769654" y3="2.9940986" z3="-2.30823261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2376331" y3="3.20728309" z3="-2.22613927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04549854" y3="4.38870514" z3="0.96170555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50988798" y3="4.01841361" z3="0.82154454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.833763" y3="2.99070904" z3="-1.25374553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06688586" y3="2.59509988" z3="-3.21341464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39633581" y3="2.95880655" z3="-3.07886118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16305153" y3="-5.91007605" z3="2.29644324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76368503" y3="-6.3992852" z3="0.24446495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31562389" y3="2.70531456" z3="-2.32877589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4620762" y3="3.03456577" z3="-0.21261513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62638216" y3="0.16298443" z3="-2.02129458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95086923" y3="1.4102451" z3="-1.88344632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80682515" y3="0.09089948" z3="-2.81146399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28471805" y3="1.19785958" z3="-3.46779027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.321934" y3="-0.87082366" z3="-2.89740703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19019167" y3="1.13016017" z3="-4.07718592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45420128" y3="2.53046731" z3="-2.60261115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58921178" y3="2.4271077" z3="-3.37048247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92302725" y3="3.48283473" z3="-2.54716448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95461669" y3="3.30134105" z3="-3.91666649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57995593" y3="3.90738386" z3="-0.25393368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76110962" y3="5.058964" z3="-0.06399158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92906124" y3="3.96209128" z3="0.1966531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4457789" y3="5.10892061" z3="0.75012013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5587651" y3="3.07499461" z3="0.10499938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48523428" y3="5.12487634" z3="1.08982846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32849883" y3="6.23566686" z3="0.49864545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6434923" y3="6.26666304" z3="0.89137851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69076853" y3="7.11607662" z3="0.62458431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06842583" y3="7.17541739" z3="1.32662917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35150512" y3="-3.92283755" z3="-2.87597633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5335054" y3="-4.95970626" z3="-2.55466203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22406787" y3="-3.59664758" z3="-3.4730506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4764785" y3="-3.91427837" z3="-3.54508636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69511839" y3="-1.59070797" z3="-2.08768076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43156461" y3="-1.1134574" z3="-2.75939526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5299932" y3="-0.93222004" z3="-1.22056201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74591442" y3="-1.63277743" z3="-2.64561918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9193,-.9549,-.6802;6.6024,-1.9516,-1.5462;6.0853,-.997,-1.409;4.7766,1.4771,-1.0645;4.2887,.3113,-.4994;2.6572,2.7373,-1.1554;4.0066,2.7355,-.8491;2.3801,4.9959,-.3845;1.81,3.8528,-.8931;1.754,5.8722,-.1905;2.0917,1.6106,-1.6781;3.129,.3592,.219;1.7146,.3843,-.6376;.6106,.7348,.2905;1.6642,-.857,-1.5004;1.0936,-2.4724,-1.3211;2.0295,-5.4869,-6.2726;1.7604,-5.0527,-5.3054;1.0556,-3.9128,-2.8497;1.7268,-3.6722,-5.1579;1.47,-5.8796,-4.2175;1.132,-5.3036,-2.9994;1.3833,-3.0706,-3.9367;1.9603,-3.0047,-5.9909;1.5205,-6.9673,-4.3115;.9433,-5.937,-2.1284;.6516,-3.3648,-1.6054;-.3485,-3.8478,-.8596;-.6918,-4.8502,-1.1289;-.3829,-3.5471,.5893;-.4159,-3.0743,3.3484;-.6913,-4.5823,1.4803;-.1105,-2.2706,1.0911;-.1239,-2.0365,2.4618;-.6993,-4.3481,2.8542;-.8838,-5.5893,1.0993;.0991,-1.4302,.4283;.1038,-1.0294,2.8216;-.9057,-5.1729,3.5416;-.4156,-2.8942,4.4274;1.3358,-1.7348,-3.9064;1.4693,-1.3298,-3.0037;.3399,3.7109,-1.0515;-2.1334,-2.9798,-1.7093;-2.9209,-3.16,-.568;-3.1122,-2.288,.3672;-3.8389,-.7235,.6298;-4.7181,-.258,-.9482;-2.5286,.4556,1.2061;-5.0647,-1.0662,2.0015;-3.4064,-4.3712,-.3372;-4.125,-4.6131,.8628;-4.0271,.0326,-1.755;-5.3747,.6104,-.758;-5.3497,-1.0871,-1.3155;-1.6463,.5621,.549;-2.1549,.1504,2.199;-2.9993,1.4506,1.3118;-5.5247,-.1199,2.3394;-5.8794,-1.736,1.6744;-4.5629,-1.5268,2.8709;-5.0609,-4.0311,.8795;-3.5149,-4.3607,1.7439;-4.3557,-5.6868,.8543;4.2799,-2.1966,-.1719;4.1364,-3.2937,-1.0337;3.4918,-4.4525,-.618;2.9954,-4.5093,.6788;3.1446,-3.4513,1.5707;3.7801,-2.2949,1.1364;4.4929,-3.2219,-2.0645;3.3498,-5.2927,-1.2984;2.2573,-5.6977,1.1085;2.738,-3.533,2.5798;3.8742,-1.4475,1.817;-.4904,4.0208,.034;-1.861,3.8063,-.0287;-2.3987,3.2806,-1.1983;-1.6077,2.9941,-2.3082;-.2376,3.2073,-2.2261;-.0455,4.3887,.9617;-2.5099,4.0184,.8215;-3.8338,2.9907,-1.2537;-2.0669,2.5951,-3.2134;.3963,2.9588,-3.0789;2.1631,-5.9101,2.2964;1.7637,-6.3993,.2445;-4.3156,2.7053,-2.3288;-4.4621,3.0346,-.2126;6.6264,.163,-2.0213;5.9509,1.4102,-1.8834;7.8068,.0909,-2.8115;8.2847,1.1979,-3.4678;8.3219,-.8708,-2.8974;9.1902,1.1302,-4.0772;6.4542,2.5305,-2.6026;7.5892,2.4271,-3.3705;5.923,3.4828,-2.5472;7.9546,3.3013,-3.9167;4.58,3.9074,-.2539;3.7611,5.059,-.064;5.9291,3.9621,.1967;6.4458,5.1089,.7501;6.5588,3.075,.105;7.4852,5.1249,1.0898;4.3285,6.2357,.4986;5.6435,6.2667,.8914;3.6908,7.1161,.6246;6.0684,7.1754,1.3266;-2.3515,-3.9228,-2.876;-2.5335,-4.9597,-2.5547;-3.2241,-3.5966,-3.4731;-1.4765,-3.9143,-3.5451;-1.6951,-1.5907,-2.0877;-2.4316,-1.1135,-2.7594;-1.53,-.9322,-1.2206;-.7459,-1.6328,-2.6456;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930948462</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000410456517 0.000058466661 0.024541227130 0.005381885211</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122620 -0.000016708 0.000065887 0.000155796 0.000302536 0.000391947 0.000430200 0.000546176 0.000666068 0.000783863 0.000955128 0.001029281 0.001186842 0.001309317 0.001422033 0.001516942 0.001634266 0.001766830 0.001993657 0.002171665 0.002407933 0.002566753 0.002848859 0.003028801 0.003445609 0.003663804 0.003925697 0.004528897 0.004806031 0.004961665 0.005188037 0.005362470 0.006045238 0.006429294 0.006468301 0.006886316 0.007078725 0.007393365 0.008183868 0.008726930 0.008835417 0.009505514 0.009777704 0.009880546 0.010953190 0.011176424 0.011899418 0.012611639 0.013377719 0.013750074 0.013991242 0.014625290 0.014912287 0.015425972 0.015897134 0.016329046 0.016662110 0.018625459 0.019282336 0.019415021 0.020209769 0.020537927 0.021549824 0.021776165 0.022452158 0.022803292 0.023491870 0.023811757 0.024524922 0.025904077 0.026630919 0.026951240 0.027161390 0.027520191 0.028351538 0.028998585 0.030792348 0.030971073 0.031581781 0.034172720 0.034763379 0.036029660 0.039058781 0.039536353 0.041986732 0.045423482 0.046139439 0.046769365 0.048860745 0.049698873 0.050035638 0.050841992 0.051546176 0.052192304 0.052289249 0.052414328 0.053008139 0.053629139 0.055001640 0.056111593 0.056443761 0.056728990 0.057017072 0.057192447 0.057793958 0.058628689 0.059261854 0.059767135 0.061358891 0.062146704 0.062937648 0.064320597 0.064582510 0.065106889 0.066043638 0.067573851 0.067899079 0.069003260 0.070522280 0.072026322 0.072411454 0.072845057 0.072979104 0.073696542 0.078703554 0.080743526 0.081897729 0.083244738 0.084082142 0.084713835 0.088973665 0.089427212 0.089831630 0.091322542 0.093335703 0.094581946 0.095499099 0.096293402 0.096864225 0.098529530 0.100153855 0.100705057 0.102760005 0.103975729 0.104554000 0.106815024 0.109210543 0.111040338 0.112313045 0.112870154 0.113950527 0.114817471 0.117010182 0.117373042 0.118632500 0.119235296 0.120673210 0.122269384 0.125111804 0.125876739 0.128554830 0.129029661 0.131049036 0.133854626 0.136535580 0.137792347 0.138612850 0.139656759 0.140479337 0.143449332 0.144614410 0.145911910 0.146811090 0.151997218 0.153609714 0.154161416 0.160199128 0.160874803 0.168571103 0.171462987 0.176080536 0.179114255 0.181632561 0.184514137 0.189130034 0.190267514 0.191988572 0.201356613 0.202237765 0.206298651 0.206967221 0.207268701 0.212417872 0.212589420 0.215632446 0.216990259 0.220435348 0.220965189 0.224614781 0.225143267 0.227147991 0.231890681 0.234599706 0.235986628 0.238579299 0.246372009 0.248742409 0.252520940 0.256564053 0.257230035 0.258329605 0.262580139 0.271581812 0.282929966 0.292035247 0.300114798 0.300185573 0.301082898 0.307145017 0.307795884 0.309854823 0.320028680 0.321366731 0.326465139 0.330869932 0.336678324 0.347771806 0.352033887 0.355654182 0.360878170 0.362103020 0.364155667 0.384574471 0.407238409 0.414483503 0.430277298 0.431912685 0.435388999 0.451125951 0.464750312 0.475682683 0.478866303 0.480462767 0.486561235 0.498904156 0.503921895 0.515221350 0.518063920 0.543832010 0.566938311 0.567735608 0.586753665 0.591968119 0.605886132 0.644254796 0.645539795 0.668090233 0.675642819 0.687422933 0.704115527 0.704333293 0.704693269 0.710986549 0.717275656 0.734284948 0.738034150 0.739770894 0.747282501 0.750844984 0.771616677 0.775989533 0.809160819 0.821852609 0.824150105 0.828942866 0.834304437 0.848067804 0.849540524 0.851413313 0.854643461 0.863471861 0.867474026 0.875938621 0.887550149 0.891136907 0.892395175 0.893642273 0.902131127 0.910324987 0.918019675 0.922987831 0.924577428 0.932019601 0.935812452 0.956132211 0.962891589 0.965331960 0.970089520 0.977709253 0.982591328 0.998658306 1.012990246 1.016307010 1.021925831 1.040218024 1.055125941 1.071298307 1.073114115 1.079714310 1.087408770 1.108544012 1.110438789 1.118280498 1.119232799 1.122635467 1.123981443 1.141898662 1.149717689 1.161768406 1.170198010 1.177301139 1.188481652 1.200773882 1.222117819 1.234199986 1.258231049 1.296495920 1.298376897 1.314746702 1.326483437 1.327535201 1.330259133 1.331433565 1.334802248 1.342456594 1.349205903 1.368679319 1.380012931 1.381340106 1.381881324 1.429609486 1.514828662 1.557992874 1.684835356 1.922951579</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">273</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91717866" y3="-0.95533758" z3="-0.68394993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59951144" y3="-1.95155053" z3="-1.55215306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08231032" y3="-0.99708251" z3="-1.41421529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77401719" y3="1.47678998" z3="-1.06702335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28663969" y3="0.31066325" z3="-0.50212493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65493518" y3="2.73808526" z3="-1.15321431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00483802" y3="2.73523372" z3="-0.84896604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38000323" y3="4.99525825" z3="-0.37739315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8085782" y3="3.85336387" z3="-0.88741122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75438081" y3="5.87147527" z3="-0.1797576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08830691" y3="1.61240337" z3="-1.67688278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12768826" y3="0.35827544" z3="0.21755176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71227898" y3="0.38493347" z3="-0.63747239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60964295" y3="0.73510265" z3="0.29251822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66012059" y3="-0.85564345" z3="-1.50122409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09330933" y3="-2.47273973" z3="-1.32101949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03333701" y3="-5.49282596" z3="-6.26863078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7637337" y3="-5.05764953" z3="-5.30206777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05730787" y3="-3.91522269" z3="-2.84786785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73004727" y3="-3.6770565" z3="-5.15589282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47272133" y3="-5.88357799" z3="-4.2134484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13401441" y3="-5.30625974" z3="-2.99610075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38582672" y3="-3.07409619" z3="-3.93552019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96405018" y3="-3.01033247" z3="-5.98951807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52331329" y3="-6.97137948" z3="-4.30622227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94497369" y3="-5.93882972" z3="-2.12460202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65256636" y3="-3.36624378" z3="-1.60425439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34719882" y3="-3.84903462" z3="-0.85827619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68959207" y3="-4.85205487" z3="-1.12618822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38206687" y3="-3.54611448" z3="0.59011814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41250827" y3="-3.06928177" z3="3.34845499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68749658" y3="-4.58066642" z3="1.48316743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11116623" y3="-2.26877838" z3="1.08965175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12294801" y3="-2.03273374" z3="2.46003913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69400665" y3="-4.34453268" z3="2.8567462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87779632" y3="-5.58947716" z3="1.10454638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09619182" y3="-1.42915261" z3="0.42518925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10313888" y3="-1.02441388" z3="2.8176007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89865223" y3="-5.16846443" z3="3.54522755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41086867" y3="-2.88770717" z3="4.42723108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33870822" y3="-1.73824824" z3="-3.90673928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46974789" y3="-1.33191699" z3="-3.00430607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33808118" y3="3.71293775" z3="-1.04404523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13340558" y3="-2.98438878" z3="-1.71048565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92031065" y3="-3.16164695" z3="-0.56821275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11232374" y3="-2.28716901" z3="0.36419368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83886434" y3="-0.72098206" z3="0.62060305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70750323" y3="-0.25291044" z3="-0.96278973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52941341" y3="0.45442453" z3="1.20556801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07530964" y3="-1.0609158" z3="1.98352383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40393606" y3="-4.37278735" z3="-0.33279247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11979952" y3="-4.6127943" z3="0.86960619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01189229" y3="0.04550862" z3="-1.76286251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37062857" y3="0.61064734" z3="-0.772941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3315694" y3="-1.08359712" z3="-1.33938342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6435907" y3="0.55988063" z3="0.5527567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16146329" y3="0.14639812" z3="2.19983391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99833279" y3="1.45036491" z3="1.31082214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53514144" y3="-0.11348542" z3="2.31872299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88950549" y3="-1.72803906" z3="1.64986205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58123485" y3="-1.52355642" z3="2.85640988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05664763" y3="-4.03183846" z3="0.88672311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50776194" y3="-4.35760386" z3="1.74860292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34980208" y3="-5.68646097" z3="0.86408282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27899845" y3="-2.1971108" z3="-0.17425006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.136095" y3="-3.29531085" z3="-1.03460779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49266339" y3="-4.45416456" z3="-0.61705634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99698016" y3="-4.50978741" z3="0.68007555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14568985" y3="-3.45061494" z3="1.57053739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78002167" y3="-2.29424409" z3="1.13446949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49200522" y3="-3.22451198" z3="-2.06569369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.351021" y3="-5.29518817" z3="-1.29638825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2597278" y3="-5.6980935" z3="1.1114106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73974618" y3="-3.53139623" z3="2.57995264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87366214" y3="-1.44591285" z3="1.81397366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49040021" y3="4.01939823" z3="0.04394435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86129761" y3="3.8073096" z3="-0.01806079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4012696" y3="3.28724103" z3="-1.18936865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61202633" y3="3.00392764" z3="-2.30120066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24158346" y3="3.21470905" z3="-2.21987224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04383043" y3="4.38307266" z3="0.97260297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50878939" y3="4.01700355" z3="0.83394737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83690566" y3="3.00039457" z3="-1.24458682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07294943" y3="2.60950719" z3="-3.20757909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39063225" y3="2.96943866" z3="-3.07484478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16601163" y3="-5.90900569" z3="2.29957078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76606205" y3="-6.40088336" z3="0.24839547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32079433" y3="2.72279274" z3="-2.32078542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46369144" y3="3.03889272" z3="-0.20231393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62250803" y3="0.16309031" z3="-2.02686446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9472212" y3="1.41029273" z3="-1.8875589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80197574" y3="0.09142808" z3="-2.81852408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27909855" y3="1.19874534" z3="-3.47483432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31698181" y3="-0.87022927" z3="-2.90558634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18383108" y3="1.13138166" z3="-4.08535324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44971271" y3="2.53089512" z3="-2.60672275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58377321" y3="2.42794319" z3="-3.37604054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91861182" y3="3.48319674" z3="-2.55009775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94857588" y3="3.30245542" z3="-3.92219705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57981127" y3="3.90578932" z3="-0.25264995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76163238" y3="5.05720128" z3="-0.05901004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92977874" y3="3.95920007" z3="0.19571022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44784961" y3="5.1047453" z3="0.7505458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55906624" y3="3.07221185" z3="0.10164782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48795487" y3="5.11972574" z3="1.08844449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33031852" y3="6.23254752" z3="0.50519407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64609082" y3="6.26238604" z3="0.8956325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69297284" y3="7.11282943" z3="0.63422284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07206925" y3="7.17007442" z3="1.33211159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35084986" y3="-3.93143634" z3="-2.87394055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53266424" y3="-4.96733284" z3="-2.54889607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2233596" y3="-3.60752956" z3="-3.47235221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47556578" y3="-3.92488266" z3="-3.54272217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69565017" y3="-1.5964012" z3="-2.09303316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43179542" y3="-1.1219836" z3="-2.76716031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53197722" y3="-0.93492598" z3="-1.22780989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74585014" y3="-1.63937994" z3="-2.64986503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9172,-.9553,-.6839;6.5995,-1.9516,-1.5522;6.0823,-.9971,-1.4142;4.774,1.4768,-1.067;4.2866,.3107,-.5021;2.6549,2.7381,-1.1532;4.0048,2.7352,-.849;2.38,4.9953,-.3774;1.8086,3.8534,-.8874;1.7544,5.8715,-.1798;2.0883,1.6124,-1.6769;3.1277,.3583,.2176;1.7123,.3849,-.6375;.6096,.7351,.2925;1.6601,-.8556,-1.5012;1.0933,-2.4727,-1.321;2.0333,-5.4928,-6.2686;1.7637,-5.0576,-5.3021;1.0573,-3.9152,-2.8479;1.73,-3.6771,-5.1559;1.4727,-5.8836,-4.2134;1.134,-5.3063,-2.9961;1.3858,-3.0741,-3.9355;1.9641,-3.0103,-5.9895;1.5233,-6.9714,-4.3062;.945,-5.9388,-2.1246;.6526,-3.3662,-1.6043;-.3472,-3.849,-.8583;-.6896,-4.8521,-1.1262;-.3821,-3.5461,.5901;-.4125,-3.0693,3.3485;-.6875,-4.5807,1.4832;-.1112,-2.2688,1.0897;-.1229,-2.0327,2.46;-.694,-4.3445,2.8567;-.8778,-5.5895,1.1045;.0962,-1.4292,.4252;.1031,-1.0244,2.8176;-.8987,-5.1685,3.5452;-.4109,-2.8877,4.4272;1.3387,-1.7382,-3.9067;1.4697,-1.3319,-3.0043;.3381,3.7129,-1.044;-2.1334,-2.9844,-1.7105;-2.9203,-3.1616,-.5682;-3.1123,-2.2872,.3642;-3.8389,-.721,.6206;-4.7075,-.2529,-.9628;-2.5294,.4544,1.2056;-5.0753,-1.0609,1.9835;-3.4039,-4.3728,-.3328;-4.1198,-4.6128,.8696;-4.0119,.0455,-1.7629;-5.3706,.6106,-.7729;-5.3316,-1.0836,-1.3394;-1.6436,.5599,.5528;-2.1615,.1464,2.1998;-2.9983,1.4504,1.3108;-5.5351,-.1135,2.3187;-5.8895,-1.728,1.6499;-4.5812,-1.5236,2.8564;-5.0566,-4.0318,.8867;-3.5078,-4.3576,1.7486;-4.3498,-5.6865,.8641;4.279,-2.1971,-.1743;4.1361,-3.2953,-1.0346;3.4927,-4.4542,-.6171;2.997,-4.5098,.6801;3.1457,-3.4506,1.5705;3.78,-2.2942,1.1345;4.492,-3.2245,-2.0657;3.351,-5.2952,-1.2964;2.2597,-5.6981,1.1114;2.7397,-3.5314,2.58;3.8737,-1.4459,1.814;-.4904,4.0194,.0439;-1.8613,3.8073,-.0181;-2.4013,3.2872,-1.1894;-1.612,3.0039,-2.3012;-.2416,3.2147,-2.2199;-.0438,4.3831,.9726;-2.5088,4.017,.8339;-3.8369,3.0004,-1.2446;-2.0729,2.6095,-3.2076;.3906,2.9694,-3.0748;2.166,-5.909,2.2996;1.7661,-6.4009,.2484;-4.3208,2.7228,-2.3208;-4.4637,3.0389,-.2023;6.6225,.1631,-2.0269;5.9472,1.4103,-1.8876;7.802,.0914,-2.8185;8.2791,1.1987,-3.4748;8.317,-.8702,-2.9056;9.1838,1.1314,-4.0854;6.4497,2.5309,-2.6067;7.5838,2.4279,-3.376;5.9186,3.4832,-2.5501;7.9486,3.3025,-3.9222;4.5798,3.9058,-.2526;3.7616,5.0572,-.059;5.9298,3.9592,.1957;6.4478,5.1047,.7505;6.5591,3.0722,.1016;7.488,5.1197,1.0884;4.3303,6.2325,.5052;5.6461,6.2624,.8956;3.693,7.1128,.6342;6.0721,7.1701,1.3321;-2.3508,-3.9314,-2.8739;-2.5327,-4.9673,-2.5489;-3.2234,-3.6075,-3.4724;-1.4756,-3.9249,-3.5427;-1.6957,-1.5964,-2.093;-2.4318,-1.122,-2.7672;-1.532,-.9349,-1.2278;-.7459,-1.6394,-2.6499;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931082239</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000441429787 0.000083566806 0.020594430903 0.005320731854</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122347 -0.000013062 0.000047735 0.000142206 0.000301329 0.000373535 0.000421131 0.000544854 0.000665041 0.000773855 0.000964444 0.001032965 0.001184503 0.001312624 0.001422041 0.001533523 0.001630547 0.001765255 0.001988951 0.002168438 0.002407763 0.002567758 0.002850579 0.003033366 0.003443922 0.003663392 0.003929906 0.004527112 0.004805730 0.004957639 0.005186791 0.005362310 0.006045049 0.006430939 0.006468044 0.006886236 0.007078565 0.007393904 0.008184352 0.008725393 0.008834298 0.009502623 0.009775153 0.009880127 0.010952045 0.011176508 0.011899335 0.012613084 0.013378120 0.013749745 0.013993040 0.014625117 0.014912097 0.015424800 0.015897707 0.016320170 0.016662335 0.018624702 0.019275223 0.019414106 0.020202282 0.020534597 0.021550241 0.021773977 0.022451492 0.022803443 0.023491841 0.023811196 0.024524788 0.025904202 0.026628920 0.026951619 0.027160782 0.027519833 0.028351625 0.028992670 0.030740539 0.030972324 0.031580832 0.034175697 0.034763752 0.036029690 0.039058607 0.039536112 0.041986799 0.045423597 0.046140422 0.046768540 0.048860640 0.049698869 0.050038789 0.050841843 0.051546205 0.052192307 0.052289239 0.052414335 0.053008993 0.053629970 0.055001718 0.056111961 0.056443888 0.056728869 0.057016626 0.057188700 0.057793725 0.058628879 0.059262046 0.059767035 0.061358847 0.062147674 0.062937659 0.064320501 0.064582840 0.065106973 0.066043179 0.067574120 0.067899344 0.069004431 0.070522247 0.072024561 0.072410849 0.072847105 0.072979238 0.073663392 0.078703526 0.080733853 0.081899222 0.083230435 0.084008451 0.084698769 0.088972642 0.089427487 0.089831560 0.091323886 0.093335504 0.094581837 0.095499160 0.096293630 0.096864351 0.098531616 0.100154600 0.100704987 0.102760619 0.103977113 0.104559807 0.106816960 0.109211991 0.111042758 0.112313145 0.112870525 0.113950832 0.114817541 0.117010395 0.117374730 0.118632594 0.119234549 0.120673370 0.122268694 0.125112509 0.125876700 0.128554598 0.129029977 0.131049155 0.133855170 0.136542400 0.137793565 0.138612487 0.139657119 0.140477006 0.143447008 0.144612824 0.145912153 0.146811132 0.151997086 0.153607678 0.154161110 0.160181883 0.160874591 0.168570242 0.171463066 0.176084631 0.179113961 0.181632774 0.184515109 0.189130495 0.190273389 0.191988290 0.201357645 0.202238308 0.206299421 0.206967201 0.207268712 0.212421275 0.212590051 0.215632491 0.216991126 0.220434428 0.220964914 0.224614823 0.225143901 0.227150461 0.231891346 0.234600271 0.235996675 0.238579187 0.246369799 0.248726956 0.252530672 0.256563780 0.257230001 0.258329743 0.262580205 0.271581797 0.282930004 0.292035269 0.300118396 0.300189319 0.301083510 0.307145025 0.307795904 0.309854810 0.320029558 0.321366868 0.326465172 0.330876236 0.336678460 0.347771671 0.352033823 0.355654172 0.360877445 0.362104342 0.364155678 0.384573997 0.407238563 0.414483637 0.430277071 0.431909744 0.435387841 0.451127599 0.464751124 0.475682873 0.478866579 0.480464459 0.486555796 0.498904188 0.503920349 0.515220259 0.518062498 0.543831996 0.566938363 0.567735739 0.586755353 0.591958547 0.605886211 0.644255957 0.645540697 0.668090454 0.675641627 0.687423035 0.704114042 0.704331511 0.704675562 0.710996584 0.717275451 0.734284581 0.738034095 0.739770896 0.747277744 0.750845493 0.771616669 0.775989542 0.809161122 0.821852845 0.824150496 0.828942904 0.834304327 0.848076983 0.849541766 0.851413509 0.854643332 0.863472956 0.867474068 0.875939285 0.887551360 0.891139872 0.892395060 0.893643422 0.902131333 0.910324726 0.918019819 0.922987819 0.924577408 0.932019795 0.935820539 0.956133637 0.962891848 0.965332962 0.970087723 0.977684295 0.982590896 0.998658564 1.012991158 1.016307214 1.021926368 1.040218919 1.055126114 1.071298652 1.073115374 1.079718679 1.087409004 1.108544041 1.110438788 1.118282810 1.119233851 1.122635590 1.123982186 1.141898667 1.149722102 1.161768452 1.170198110 1.177301360 1.188493272 1.200773924 1.222121252 1.234200185 1.258231168 1.296496033 1.298380176 1.314746960 1.326483404 1.327535111 1.330258635 1.331433801 1.334802321 1.342456563 1.349207258 1.368697146 1.380012986 1.381340209 1.381881452 1.429609093 1.514741272 1.557992795 1.684835630 1.922942465</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">274</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91178087" y3="-0.95557215" z3="-0.68705645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59378173" y3="-1.95282504" z3="-1.55479105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07708965" y3="-0.9980414" z3="-1.41710371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77090556" y3="1.47674538" z3="-1.06973333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28215481" y3="0.31091291" z3="-0.50534702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.653534" y3="2.74078351" z3="-1.15448426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0034369" y3="2.73596947" z3="-0.85064888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38147115" y3="4.99718699" z3="-0.37475393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80860078" y3="3.85655563" z3="-0.8859407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75692392" y3="5.87349493" z3="-0.17575929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08537865" y3="1.61643487" z3="-1.67957437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12305794" y3="0.35959189" z3="0.2139937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.707871" y3="0.38858756" z3="-0.64123391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60553922" y3="0.73947283" z3="0.28879247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65440706" y3="-0.85162415" z3="-1.50526613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09306533" y3="-2.47126296" z3="-1.32288291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04030881" y3="-5.4954273" z3="-6.26620221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76935438" y3="-5.05970115" z3="-5.30029193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05981294" y3="-3.9159218" z3="-2.84772203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73321704" y3="-3.67906155" z3="-5.15561706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47896029" y3="-5.88496098" z3="-4.21101249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13860711" y3="-5.30696178" z3="-2.9944925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3873306" y3="-3.07538008" z3="-3.93611118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96649411" y3="-3.01276194" z3="-5.98976243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53130288" y3="-6.97273889" z3="-4.30264679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95003903" y3="-5.93904533" z3="-2.12259797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65412326" y3="-3.36586064" z3="-1.60490505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34332658" y3="-3.85068913" z3="-0.85680167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68371966" y3="-4.85493245" z3="-1.12259517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37861871" y3="-3.54398395" z3="0.59071082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40937029" y3="-3.05840712" z3="3.34752065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6810937" y3="-4.57646475" z3="1.48681068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11169913" y3="-2.26381275" z3="1.08622517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12377752" y3="-2.02311942" z3="2.45574556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68821831" y3="-4.33548281" z3="2.85955061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86970356" y3="-5.58609419" z3="1.11079356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09299159" y3="-1.42583396" z3="0.41901827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.0997834" y3="-1.01325766" z3="2.81015212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88986785" y3="-5.15806424" z3="3.55112021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40854869" y3="-2.87307593" z3="4.42560816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3378449" y3="-1.73965163" z3="-3.9090413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46673719" y3="-1.33157982" z3="-3.00708334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3377141" y3="3.71747766" z3="-1.0399789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13348018" y3="-2.99167407" z3="-1.7108967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91926015" y3="-3.16627603" z3="-0.56771076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11329117" y3="-2.28789372" z3="0.36100564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83919033" y3="-0.72156605" z3="0.61493914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69912103" y3="-0.24844925" z3="-0.97162654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53019411" y3="0.44997994" z3="1.20865791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08491395" y3="-1.06169273" z3="1.96953856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4004417" y3="-4.37753349" z3="-0.32748754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11581581" y3="-4.61273449" z3="0.87577372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00029649" y3="0.0565872" z3="-1.76619347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36632156" y3="0.61179329" z3="-0.78087307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31864209" y3="-1.07903992" z3="-1.35600111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6400273" y3="0.55290303" z3="0.56137149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17006272" y3="0.14058035" z3="2.20543453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99698878" y3="1.44715904" z3="1.31095658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54424887" y3="-0.11381503" z3="2.30383638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89878501" y3="-1.72591281" z3="1.62926762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59760355" y3="-1.52745444" z3="2.84448904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0519066" y3="-4.03127813" z3="0.8916325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50389383" y3="-4.35446032" z3="1.75387287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34532432" y3="-5.68687226" z3="0.87444303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27385764" y3="-2.19731345" z3="-0.17691935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13438095" y3="-3.29706868" z3="-1.0359778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49330288" y3="-4.45695944" z3="-0.61761698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99608568" y3="-4.51189225" z3="0.67895152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14101715" y3="-3.45102439" z3="1.5680727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77322338" y3="-2.2937805" z3="1.1312667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49149339" y3="-3.2270244" z3="-2.06669858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35474279" y3="-5.29937811" z3="-1.29595163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26142916" y3="-5.70158097" z3="1.11111838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73386484" y3="-3.53129465" z3="2.57705517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86431115" y3="-1.44463623" z3="1.80993761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48769995" y3="4.01962585" z3="0.05149221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85887806" y3="3.80822296" z3="-0.00740845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40224164" y3="3.2934578" z3="-1.1792943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61621842" y3="3.01494402" z3="-2.2947884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24537909" y3="3.22478637" z3="-2.21653102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03828413" y3="4.37916308" z3="0.98034106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50399461" y3="4.01462892" z3="0.84717273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83831982" y3="3.00798364" z3="-1.23193638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07993328" y3="2.6249452" z3="-3.20162641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38443519" y3="2.98299684" z3="-3.07418216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1687299" y3="-5.91238778" z3="2.29942319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76857569" y3="-6.40554784" z3="0.24858216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32573806" y3="2.73809746" z3="-2.30846502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4619167" y3="3.03983637" z3="-0.1874281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61837646" y3="0.16170261" z3="-2.02953202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94418627" y3="1.40947393" z3="-1.89000871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79805768" y3="0.08918413" z3="-2.82085004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27643274" y3="1.1963178" z3="-3.47653398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31222819" y3="-0.87294267" z3="-2.90809901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18135617" y3="1.12832781" z3="-4.0867499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4479431" y3="2.52993809" z3="-2.60848818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58220813" y3="2.42619237" z3="-3.37743369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91770209" y3="3.48276239" z3="-2.55154666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94806657" y3="3.3005988" z3="-3.92303809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57992974" y3="3.90502318" z3="-0.25280368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7632946" y3="5.05725678" z3="-0.05731177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92984106" y3="3.95606059" z3="0.19572851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44933169" y3="5.10021395" z3="0.75219783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5579315" y3="3.06824132" z3="0.10047494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48926633" y3="5.11332065" z3="1.09037195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33356847" y3="6.23120508" z3="0.50818231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64926355" y3="6.2588121" z3="0.89865576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69746734" y3="7.11216728" z3="0.63829364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07641763" y3="7.16542211" z3="1.33623147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34927915" y3="-3.9434624" z3="-2.87088845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53063698" y3="-4.97810444" z3="-2.54195691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2215583" y3="-3.62250854" z3="-3.47122066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4737259" y3="-3.93912497" z3="-3.53938971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69831451" y3="-1.60416638" z3="-2.09860422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43503725" y3="-1.13387109" z3="-2.77479717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53627717" y3="-0.9389441" z3="-1.23592026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74808946" y3="-1.64719646" z3="-2.65462531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9118,-.9556,-.6871;6.5938,-1.9528,-1.5548;6.0771,-.998,-1.4171;4.7709,1.4767,-1.0697;4.2822,.3109,-.5053;2.6535,2.7408,-1.1545;4.0034,2.736,-.8506;2.3815,4.9972,-.3748;1.8086,3.8566,-.8859;1.7569,5.8735,-.1758;2.0854,1.6164,-1.6796;3.1231,.3596,.214;1.7079,.3886,-.6412;.6055,.7395,.2888;1.6544,-.8516,-1.5053;1.0931,-2.4713,-1.3229;2.0403,-5.4954,-6.2662;1.7694,-5.0597,-5.3003;1.0598,-3.9159,-2.8477;1.7332,-3.6791,-5.1556;1.479,-5.885,-4.211;1.1386,-5.307,-2.9945;1.3873,-3.0754,-3.9361;1.9665,-3.0128,-5.9898;1.5313,-6.9727,-4.3026;.95,-5.939,-2.1226;.6541,-3.3659,-1.6049;-.3433,-3.8507,-.8568;-.6837,-4.8549,-1.1226;-.3786,-3.544,.5907;-.4094,-3.0584,3.3475;-.6811,-4.5765,1.4868;-.1117,-2.2638,1.0862;-.1238,-2.0231,2.4557;-.6882,-4.3355,2.8596;-.8697,-5.5861,1.1108;.093,-1.4258,.419;.0998,-1.0133,2.8102;-.8899,-5.1581,3.5511;-.4085,-2.8731,4.4256;1.3378,-1.7397,-3.909;1.4667,-1.3316,-3.0071;.3377,3.7175,-1.04;-2.1335,-2.9917,-1.7109;-2.9193,-3.1663,-.5677;-3.1133,-2.2879,.361;-3.8392,-.7216,.6149;-4.6991,-.2484,-.9716;-2.5302,.45,1.2087;-5.0849,-1.0617,1.9695;-3.4004,-4.3775,-.3275;-4.1158,-4.6127,.8758;-4.0003,.0566,-1.7662;-5.3663,.6118,-.7809;-5.3186,-1.079,-1.356;-1.64,.5529,.5614;-2.1701,.1406,2.2054;-2.997,1.4472,1.311;-5.5442,-.1138,2.3038;-5.8988,-1.7259,1.6293;-4.5976,-1.5275,2.8445;-5.0519,-4.0313,.8916;-3.5039,-4.3545,1.7539;-4.3453,-5.6869,.8744;4.2739,-2.1973,-.1769;4.1344,-3.2971,-1.036;3.4933,-4.457,-.6176;2.9961,-4.5119,.679;3.141,-3.451,1.5681;3.7732,-2.2938,1.1313;4.4915,-3.227,-2.0667;3.3547,-5.2994,-1.296;2.2614,-5.7016,1.1111;2.7339,-3.5313,2.5771;3.8643,-1.4446,1.8099;-.4877,4.0196,.0515;-1.8589,3.8082,-.0074;-2.4022,3.2935,-1.1793;-1.6162,3.0149,-2.2948;-.2454,3.2248,-2.2165;-.0383,4.3792,.9803;-2.504,4.0146,.8472;-3.8383,3.008,-1.2319;-2.0799,2.6249,-3.2016;.3844,2.983,-3.0742;2.1687,-5.9124,2.2994;1.7686,-6.4055,.2486;-4.3257,2.7381,-2.3085;-4.4619,3.0398,-.1874;6.6184,.1617,-2.0295;5.9442,1.4095,-1.89;7.7981,.0892,-2.8209;8.2764,1.1963,-3.4765;8.3122,-.8729,-2.9081;9.1814,1.1283,-4.0867;6.4479,2.5299,-2.6085;7.5822,2.4262,-3.3774;5.9177,3.4828,-2.5515;7.9481,3.3006,-3.923;4.5799,3.905,-.2528;3.7633,5.0573,-.0573;5.9298,3.9561,.1957;6.4493,5.1002,.7522;6.5579,3.0682,.1005;7.4893,5.1133,1.0904;4.3336,6.2312,.5082;5.6493,6.2588,.8987;3.6975,7.1122,.6383;6.0764,7.1654,1.3362;-2.3493,-3.9435,-2.8709;-2.5306,-4.9781,-2.542;-3.2216,-3.6225,-3.4712;-1.4737,-3.9391,-3.5394;-1.6983,-1.6042,-2.0986;-2.435,-1.1339,-2.7748;-1.5363,-.9389,-1.2359;-.7481,-1.6472,-2.6546;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929269536</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000554879820 0.000105178684 0.020562229572 0.005308839668</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122762 -0.000017543 0.000035733 0.000167002 0.000298995 0.000374096 0.000418580 0.000549776 0.000670313 0.000773507 0.000970171 0.001035626 0.001185787 0.001314591 0.001422092 0.001548616 0.001631179 0.001767068 0.001989421 0.002169717 0.002407044 0.002571544 0.002850165 0.003037806 0.003445662 0.003664695 0.003932066 0.004529166 0.004806643 0.004958869 0.005186487 0.005363878 0.006048202 0.006433142 0.006468471 0.006891023 0.007078777 0.007394346 0.008185453 0.008726269 0.008834651 0.009503491 0.009775327 0.009880114 0.010952429 0.011177712 0.011899015 0.012615915 0.013379016 0.013749740 0.013996222 0.014625009 0.014912060 0.015424582 0.015898221 0.016319570 0.016662680 0.018624988 0.019275413 0.019414521 0.020203117 0.020534721 0.021550788 0.021774512 0.022451354 0.022803672 0.023491887 0.023813253 0.024525099 0.025904239 0.026628813 0.026951513 0.027160891 0.027519649 0.028351858 0.028996535 0.030738908 0.030973698 0.031580686 0.034178383 0.034764269 0.036030200 0.039058700 0.039535957 0.041987311 0.045423633 0.046139725 0.046767148 0.048860520 0.049698857 0.050042468 0.050841890 0.051546344 0.052192560 0.052289247 0.052414362 0.053009389 0.053631192 0.055002002 0.056112025 0.056444012 0.056728827 0.057016735 0.057187661 0.057793690 0.058628889 0.059262272 0.059767173 0.061358818 0.062148713 0.062937650 0.064320809 0.064583030 0.065107117 0.066043618 0.067575362 0.067899030 0.069005880 0.070526287 0.072024806 0.072411195 0.072849549 0.072979752 0.073662212 0.078705636 0.080733645 0.081904803 0.083230943 0.084009448 0.084698811 0.088972885 0.089427966 0.089831599 0.091325262 0.093335679 0.094581940 0.095499273 0.096294114 0.096864599 0.098535275 0.100157610 0.100705038 0.102761944 0.103978131 0.104568396 0.106818857 0.109214472 0.111045545 0.112313163 0.112871642 0.113952890 0.114817793 0.117011391 0.117379117 0.118635541 0.119234250 0.120674265 0.122268477 0.125112697 0.125876975 0.128555743 0.129031943 0.131050670 0.133855432 0.136551086 0.137795818 0.138612048 0.139657475 0.140477015 0.143447266 0.144613098 0.145913168 0.146811662 0.151997736 0.153605736 0.154161065 0.160181508 0.160874643 0.168571941 0.171463096 0.176097234 0.179114355 0.181633462 0.184516971 0.189131111 0.190281969 0.191987489 0.201359125 0.202239003 0.206300416 0.206967197 0.207268761 0.212425294 0.212591050 0.215632715 0.216995147 0.220436843 0.220964712 0.224616061 0.225144129 0.227150839 0.231892806 0.234601227 0.236013114 0.238580157 0.246370588 0.248727247 0.252545191 0.256564077 0.257230101 0.258329654 0.262580262 0.271581814 0.282930019 0.292035541 0.300121516 0.300195702 0.301085254 0.307145371 0.307795980 0.309854804 0.320029125 0.321367372 0.326465141 0.330891506 0.336679181 0.347772052 0.352033817 0.355654141 0.360881031 0.362104779 0.364155808 0.384574354 0.407238829 0.414484043 0.430278396 0.431909896 0.435392240 0.451130019 0.464752033 0.475683071 0.478867272 0.480469400 0.486557132 0.498904453 0.503921022 0.515219995 0.518062554 0.543833198 0.566939010 0.567736046 0.586758731 0.591958750 0.605887633 0.644267389 0.645542013 0.668090496 0.675642240 0.687423141 0.704116407 0.704332491 0.704679618 0.711015298 0.717275792 0.734286587 0.738034097 0.739772684 0.747276970 0.750846764 0.771616765 0.775989613 0.809162198 0.821853675 0.824151134 0.828943230 0.834304411 0.848100542 0.849544401 0.851413663 0.854643558 0.863477506 0.867474256 0.875940148 0.887557174 0.891159085 0.892395528 0.893648810 0.902131847 0.910326862 0.918020443 0.922989612 0.924577563 0.932020187 0.935849165 0.956135194 0.962892355 0.965336688 0.970090509 0.977687233 0.982592091 0.998659962 1.012995037 1.016307403 1.021927897 1.040221728 1.055126211 1.071298926 1.073116299 1.079729213 1.087410148 1.108544018 1.110438859 1.118285367 1.119235095 1.122635730 1.123982790 1.141898700 1.149738974 1.161768517 1.170198177 1.177301728 1.188526770 1.200774195 1.222125425 1.234202648 1.258231817 1.296497835 1.298405646 1.314747673 1.326483426 1.327536179 1.330258665 1.331434644 1.334803670 1.342458124 1.349208125 1.368734891 1.380013026 1.381340409 1.381882750 1.429610555 1.514755706 1.557993028 1.684836314 1.922943840</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">275</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91683616" y3="-0.95508685" z3="-0.68384312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59761692" y3="-1.95170277" z3="-1.55461176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08065441" y3="-0.99717057" z3="-1.41621811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77307123" y3="1.47684583" z3="-1.06810106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28666735" y3="0.31107362" z3="-0.50164459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65395556" y3="2.73802489" z3="-1.15160101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00426684" y3="2.73536261" z3="-0.84951887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38028616" y3="4.99570003" z3="-0.37640622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80816693" y3="3.85356466" z3="-0.88503005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75509531" y3="5.87193995" z3="-0.17881737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08632893" y3="1.61213011" z3="-1.6737073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1288495" y3="0.35932252" z3="0.2198105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71230212" y3="0.38492075" z3="-0.63324276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61063269" y3="0.73467259" z3="0.29795474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65973317" y3="-0.85599918" z3="-1.49638786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09471904" y3="-2.47383575" z3="-1.31772581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04183617" y3="-5.49080904" z3="-6.26578546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77081086" y3="-5.05626482" z3="-5.29935368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06082974" y3="-3.91541831" z3="-2.84549588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73706021" y3="-3.67579309" z3="-5.15230036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47800252" y3="-5.88287501" z3="-4.21176513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13752665" y3="-5.30634654" z3="-2.99455581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39105623" y3="-3.0736144" z3="-3.93208226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97236652" y3="-3.00849682" z3="-5.98507276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52856282" y3="-6.97059233" z3="-4.30522798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94709498" y3="-5.93950113" z3="-2.12382989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65445062" y3="-3.36702303" z3="-1.60219639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34591625" y3="-3.85084745" z3="-0.85735176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68804192" y3="-4.85361262" z3="-1.12650238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38280048" y3="-3.54902318" z3="0.59119963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41837245" y3="-3.07451608" z3="3.34990801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69093903" y3="-4.58402062" z3="1.48259806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11223024" y3="-2.27190634" z3="1.09239952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1268533" y3="-2.03689801" z3="2.46294417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70032869" y3="-4.34875593" z3="2.85626586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88191091" y3="-5.59171305" z3="1.10222216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09715186" y3="-1.43181416" z3="0.42917665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09939341" y3="-1.02929605" z3="2.82215355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90650523" y3="-5.1733474" z3="3.54394943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41917994" y3="-2.89363816" z3="4.42875605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34404484" y3="-1.73782169" z3="-3.90258026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47302123" y3="-1.3319297" z3="-2.99963576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33749985" y3="3.71341383" z3="-1.04003361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13127846" y3="-2.98531137" z3="-1.71138694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9197455" y3="-3.16187554" z3="-0.57021054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11248829" y3="-2.28661322" z3="0.36157549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83811761" y3="-0.72039062" z3="0.61807083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7019308" y3="-0.2495922" z3="-0.96703887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52869191" y3="0.45267747" z3="1.20775469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07917787" y3="-1.06046613" z3="1.9767258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40489056" y3="-4.37255104" z3="-0.33544411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12390307" y3="-4.61042436" z3="0.86522361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0041503" y3="0.0525669" z3="-1.76349966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3678423" y3="0.61180854" z3="-0.77773405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32262009" y3="-1.08054984" z3="-1.34820329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64162582" y3="0.55835255" z3="0.55678656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16300814" y3="0.14268676" z3="2.20224132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99701452" y3="1.44879109" z3="1.3135497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53983221" y3="-0.11287356" z3="2.30996216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89239396" y3="-1.72744459" z3="1.64034326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58844201" y3="-1.52298768" z3="2.85141787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05945511" y3="-4.02789074" z3="0.87994061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51396775" y3="-4.3554759" z3="1.74565954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35506502" y3="-5.68406474" z3="0.860046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27937505" y3="-2.19675294" z3="-0.17293315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1368526" y3="-3.29564563" z3="-1.03252269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49362581" y3="-4.45437723" z3="-0.61431265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99737813" y3="-4.50907278" z3="0.68263399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14594512" y3="-3.44933835" z3="1.57247037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78040838" y3="-2.29325351" z3="1.13586392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49279798" y3="-3.22553347" z3="-2.06364203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.352429" y3="-5.29595103" z3="-1.29309361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25989864" y3="-5.69715091" z3="1.11444246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73980858" y3="-3.5295082" z3="2.58185306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87416182" y3="-1.44479212" z3="1.81505289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48980568" y3="4.0198732" z3="0.04878311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86093965" y3="3.808446" z3="-0.01188445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40231509" y3="3.28943433" z3="-1.18283253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61428296" y3="3.00622077" z3="-2.29563992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24355449" y3="3.21596691" z3="-2.2155596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0420886" y3="4.38301766" z3="0.97701871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50755497" y3="4.01803485" z3="0.84079986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8382673" y3="3.0036877" z3="-1.23687283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07633706" y3="2.61263095" z3="-3.2017458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38799011" y3="2.97022805" z3="-3.07085059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16579754" y3="-5.90743362" z3="2.30273022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7665047" y3="-6.40039318" z3="0.25164226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32393273" y3="2.7301879" z3="-2.31326736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46342819" y3="3.03867209" z3="-0.19348891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61964156" y3="0.16259373" z3="-2.03068206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94466429" y3="1.40989408" z3="-1.89080542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79736627" y3="0.09038299" z3="-2.82486891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27300617" y3="1.19725171" z3="-3.48299378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31214625" y3="-0.87135544" z3="-2.91247729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17632355" y3="1.12943536" z3="-4.09554101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44562704" y3="2.53007161" z3="-2.61167164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57796242" y3="2.42657144" z3="-3.38342188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91466632" y3="3.4824395" z3="-2.55444368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9415624" y3="3.30071934" z3="-3.93094591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58013174" y3="3.90623995" z3="-0.25473843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76233464" y3="5.05778907" z3="-0.06026395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93074539" y3="3.95985466" z3="0.19138629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44970523" y3="5.1056911" z3="0.74480093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55982769" y3="3.07272512" z3="0.09658738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4902712" y3="5.12082672" z3="1.08102951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33197323" y3="6.23343313" z3="0.50230099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64829888" y3="6.2634437" z3="0.89056596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69494482" y3="7.1138191" z3="0.6318441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0749974" y3="7.17137946" z3="1.32579242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34781989" y3="-3.93225838" z3="-2.87514515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53131218" y3="-4.96783924" z3="-2.55032392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21895135" y3="-3.60746106" z3="-3.47503433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47156624" y3="-3.92687763" z3="-3.54270159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69245478" y3="-1.5974292" z3="-2.09354173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42822726" y3="-1.12224429" z3="-2.76741486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52815569" y3="-0.93633775" z3="-1.22815092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74268362" y3="-1.64096282" z3="-2.65031814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9168,-.9551,-.6838;6.5976,-1.9517,-1.5546;6.0807,-.9972,-1.4162;4.7731,1.4768,-1.0681;4.2867,.3111,-.5016;2.654,2.738,-1.1516;4.0043,2.7354,-.8495;2.3803,4.9957,-.3764;1.8082,3.8536,-.885;1.7551,5.8719,-.1788;2.0863,1.6121,-1.6737;3.1288,.3593,.2198;1.7123,.3849,-.6332;.6106,.7347,.298;1.6597,-.856,-1.4964;1.0947,-2.4738,-1.3177;2.0418,-5.4908,-6.2658;1.7708,-5.0563,-5.2994;1.0608,-3.9154,-2.8455;1.7371,-3.6758,-5.1523;1.478,-5.8829,-4.2118;1.1375,-5.3063,-2.9946;1.3911,-3.0736,-3.9321;1.9724,-3.0085,-5.9851;1.5286,-6.9706,-4.3052;.9471,-5.9395,-2.1238;.6545,-3.367,-1.6022;-.3459,-3.8508,-.8574;-.688,-4.8536,-1.1265;-.3828,-3.549,.5912;-.4184,-3.0745,3.3499;-.6909,-4.584,1.4826;-.1122,-2.2719,1.0924;-.1269,-2.0369,2.4629;-.7003,-4.3488,2.8563;-.8819,-5.5917,1.1022;.0972,-1.4318,.4292;.0994,-1.0293,2.8222;-.9065,-5.1733,3.5439;-.4192,-2.8936,4.4288;1.344,-1.7378,-3.9026;1.473,-1.3319,-2.9996;.3375,3.7134,-1.04;-2.1313,-2.9853,-1.7114;-2.9197,-3.1619,-.5702;-3.1125,-2.2866,.3616;-3.8381,-.7204,.6181;-4.7019,-.2496,-.967;-2.5287,.4527,1.2078;-5.0792,-1.0605,1.9767;-3.4049,-4.3726,-.3354;-4.1239,-4.6104,.8652;-4.0042,.0526,-1.7635;-5.3678,.6118,-.7777;-5.3226,-1.0805,-1.3482;-1.6416,.5584,.5568;-2.163,.1427,2.2022;-2.997,1.4488,1.3135;-5.5398,-.1129,2.31;-5.8924,-1.7274,1.6403;-4.5884,-1.523,2.8514;-5.0595,-4.0279,.8799;-3.514,-4.3555,1.7457;-4.3551,-5.6841,.86;4.2794,-2.1968,-.1729;4.1369,-3.2956,-1.0325;3.4936,-4.4544,-.6143;2.9974,-4.5091,.6826;3.1459,-3.4493,1.5725;3.7804,-2.2933,1.1359;4.4928,-3.2255,-2.0636;3.3524,-5.296,-1.2931;2.2599,-5.6972,1.1144;2.7398,-3.5295,2.5819;3.8742,-1.4448,1.8151;-.4898,4.0199,.0488;-1.8609,3.8084,-.0119;-2.4023,3.2894,-1.1828;-1.6143,3.0062,-2.2956;-.2436,3.216,-2.2156;-.0421,4.383,.977;-2.5076,4.018,.8408;-3.8383,3.0037,-1.2369;-2.0763,2.6126,-3.2017;.388,2.9702,-3.0709;2.1658,-5.9074,2.3027;1.7665,-6.4004,.2516;-4.3239,2.7302,-2.3133;-4.4634,3.0387,-.1935;6.6196,.1626,-2.0307;5.9447,1.4099,-1.8908;7.7974,.0904,-2.8249;8.273,1.1973,-3.483;8.3121,-.8714,-2.9125;9.1763,1.1294,-4.0955;6.4456,2.5301,-2.6117;7.578,2.4266,-3.3834;5.9147,3.4824,-2.5544;7.9416,3.3007,-3.9309;4.5801,3.9062,-.2547;3.7623,5.0578,-.0603;5.9307,3.9599,.1914;6.4497,5.1057,.7448;6.5598,3.0727,.0966;7.4903,5.1208,1.081;4.332,6.2334,.5023;5.6483,6.2634,.8906;3.6949,7.1138,.6318;6.075,7.1714,1.3258;-2.3478,-3.9323,-2.8751;-2.5313,-4.9678,-2.5503;-3.219,-3.6075,-3.475;-1.4716,-3.9269,-3.5427;-1.6925,-1.5974,-2.0935;-2.4282,-1.1222,-2.7674;-1.5282,-.9363,-1.2282;-.7427,-1.641,-2.6503;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931538556</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000284710082 0.000054083615 0.021407263909 0.005354734246</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001580555197 0.001053703465</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057121848 -0.000029551 0.000069165 0.000192836 0.000303684 0.000374031 0.000421108 0.000546354 0.000679898 0.000768925 0.000977631 0.001038330 0.001186088 0.001315306 0.001420635 0.001568491 0.001630498 0.001766560 0.001983963 0.002165472 0.002396847 0.002563978 0.002834844 0.003036685 0.003428472 0.003666354 0.003935437 0.004512721 0.004806476 0.004961512 0.005184679 0.005362447 0.006048432 0.006434118 0.006468794 0.006887554 0.007069932 0.007395439 0.008186135 0.008725841 0.008834037 0.009502432 0.009772701 0.009879843 0.010954070 0.011178215 0.011897509 0.012617732 0.013380282 0.013749991 0.013993816 0.014624966 0.014912139 0.015424368 0.015899397 0.016311710 0.016662985 0.018625552 0.019265491 0.019414272 0.020200881 0.020533554 0.021551362 0.021773512 0.022450670 0.022804106 0.023492249 0.023811268 0.024525432 0.025904482 0.026627770 0.026950846 0.027161686 0.027519333 0.028351936 0.028989058 0.030692499 0.030972886 0.031579736 0.034180035 0.034765185 0.036029985 0.039058869 0.039535746 0.041987791 0.045423064 0.046137840 0.046764812 0.048860458 0.049698851 0.050043556 0.050841962 0.051546512 0.052192540 0.052289248 0.052414416 0.053009716 0.053632204 0.055001788 0.056112457 0.056443852 0.056728834 0.057016376 0.057188111 0.057793463 0.058629081 0.059262698 0.059767115 0.061358540 0.062149148 0.062937497 0.064320683 0.064583480 0.065106677 0.066043897 0.067574305 0.067896954 0.069007495 0.070522760 0.072013145 0.072406720 0.072850513 0.072980221 0.073619609 0.078707232 0.080725196 0.081913647 0.083215633 0.083955339 0.084688898 0.088971834 0.089428758 0.089831561 0.091326679 0.093335473 0.094581758 0.095499518 0.096292890 0.096864931 0.098536506 0.100161281 0.100705376 0.102763525 0.103978942 0.104572776 0.106820327 0.109218107 0.111046478 0.112313217 0.112871525 0.113954544 0.114816879 0.117011358 0.117381995 0.118635254 0.119232214 0.120675182 0.122267666 0.125113402 0.125877091 0.128556919 0.129032755 0.131051925 0.133855599 0.136555397 0.137796431 0.138612801 0.139658292 0.140475344 0.143446435 0.144611926 0.145913775 0.146811488 0.151999605 0.153606279 0.154159466 0.160160302 0.160875222 0.168570856 0.171463274 0.176102468 0.179114183 0.181634280 0.184519478 0.189133078 0.190289776 0.191988313 0.201360372 0.202238795 0.206301634 0.206967230 0.207268795 0.212427482 0.212592066 0.215633202 0.216998836 0.220437023 0.220962156 0.224614004 0.225144286 0.227151576 0.231893597 0.234601832 0.236024703 0.238580256 0.246367865 0.248709483 0.252561123 0.256564052 0.257230133 0.258329440 0.262580184 0.271581885 0.282929692 0.292035798 0.300120544 0.300195845 0.301086111 0.307145587 0.307796049 0.309854665 0.320026041 0.321367657 0.326464916 0.330891497 0.336678958 0.347772177 0.352033830 0.355654135 0.360885833 0.362106675 0.364155875 0.384575231 0.407239280 0.414483452 0.430278166 0.431906986 0.435391544 0.451130134 0.464752069 0.475682214 0.478867861 0.480470298 0.486553831 0.498904555 0.503919889 0.515218967 0.518061157 0.543834260 0.566939673 0.567736408 0.586759994 0.591952012 0.605886549 0.644276790 0.645543253 0.668090500 0.675641845 0.687423069 0.704115664 0.704328304 0.704650493 0.711022906 0.717275649 0.734286555 0.738033996 0.739771768 0.747271834 0.750847408 0.771616731 0.775989667 0.809162125 0.821854050 0.824151833 0.828943349 0.834304449 0.848114520 0.849545345 0.851413882 0.854643540 0.863479344 0.867474318 0.875940379 0.887559057 0.891163472 0.892395831 0.893653531 0.902132107 0.910328573 0.918016692 0.922978257 0.924577050 0.932020435 0.935854365 0.956137472 0.962890092 0.965336413 0.970089913 0.977663833 0.982592688 0.998660426 1.012994089 1.016307299 1.021928345 1.040222941 1.055126266 1.071299084 1.073116196 1.079734007 1.087410875 1.108543983 1.110438906 1.118286894 1.119236213 1.122635810 1.123983390 1.141898760 1.149748609 1.161768584 1.170198280 1.177301918 1.188543163 1.200774455 1.222125871 1.234203380 1.258232402 1.296498199 1.298405016 1.314747825 1.326483361 1.327536341 1.330258471 1.331435256 1.334804061 1.342457239 1.349209903 1.368749887 1.380013013 1.381340567 1.381883260 1.429606017 1.514707043 1.557993296 1.684836966 1.922936366</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">276</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91373583" y3="-0.95526774" z3="-0.68465364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59355144" y3="-1.95254452" z3="-1.5565149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07666156" y3="-0.99794811" z3="-1.41841763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76985708" y3="1.47644418" z3="-1.07047049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28404814" y3="0.31115483" z3="-0.50249225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65114474" y3="2.73928774" z3="-1.14906145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0023252" y3="2.7355532" z3="-0.8504691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38121429" y3="4.99720387" z3="-0.37350269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80695341" y3="3.85546427" z3="-0.88049408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75704148" y3="5.87389259" z3="-0.17408766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08118224" y3="1.61402854" z3="-1.67001527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12750537" y3="0.36023707" z3="0.22095908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70940687" y3="0.38613406" z3="-0.62957932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60935585" y3="0.734931" z3="0.30397901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65536957" y3="-0.8543345" z3="-1.49339135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09441802" y3="-2.47347489" z3="-1.31603464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.05602371" y3="-5.49158297" z3="-6.26052952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.78200744" y3="-5.05698855" z3="-5.29492093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06484073" y3="-3.91597093" z3="-2.84304853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.74704442" y3="-3.67654221" z3="-5.14820168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48657864" y3="-5.88351051" z3="-4.20795384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14254904" y3="-5.30688649" z3="-2.99176114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39735142" y3="-3.07422526" z3="-3.92900109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.98432033" y3="-3.00931832" z3="-5.98048055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53799535" y3="-6.97122419" z3="-4.30102823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95036886" y3="-5.93998891" z3="-2.12135916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65602378" y3="-3.36779328" z3="-1.60042034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34480735" y3="-3.85180053" z3="-0.85692969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68594738" y3="-4.85483764" z3="-1.12625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38377733" y3="-3.54940934" z3="0.59136281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42141414" y3="-3.07373466" z3="3.34980952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69161149" y3="-4.58434939" z3="1.48320659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11408987" y3="-2.27230614" z3="1.09211771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12957113" y3="-2.0368034" z3="2.46255805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70165645" y3="-4.34880381" z3="2.85685835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88125584" y3="-5.5927353" z3="1.10351075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09544808" y3="-1.4326637" z3="0.42840105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.095413" y3="-1.02863522" z3="2.82109693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90803774" y3="-5.17300837" z3="3.54458871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42260843" y3="-2.89266142" z3="4.4286723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34959597" y3="-1.73846265" z3="-3.90014782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47521232" y3="-1.33177764" z3="-2.99708207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33579713" y3="3.71649072" z3="-1.03223557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13047555" y3="-2.98797343" z3="-1.71360194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91951544" y3="-3.16354565" z3="-0.57262943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11309227" y3="-2.28777614" z3="0.35825758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83759405" y3="-0.72023583" z3="0.61244319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69119806" y3="-0.24430668" z3="-0.97697574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5291473" y3="0.44849227" z3="1.21245705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08866758" y3="-1.05943828" z3="1.96203739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.404094" y3="-4.37414842" z3="-0.33673799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1224052" y3="-4.61273458" z3="0.86436315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98883043" y3="0.06516615" z3="-1.76669806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36241832" y3="0.61295526" z3="-0.7878876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30536473" y3="-1.07581002" z3="-1.36744849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63701132" y3="0.55200609" z3="0.56772441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17179598" y3="0.13653364" z3="2.20936196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99519658" y3="1.44592042" z3="1.31576289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55055621" y3="-0.11119631" z3="2.29199448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90038113" y3="-1.72489148" z3="1.61893599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60561798" y3="-1.52318023" z3="2.84042224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0596648" y3="-4.03202296" z3="0.87872556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51217303" y3="-4.35650299" z3="1.74420804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35227061" y3="-5.68639535" z3="0.85969059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27705689" y3="-2.19673307" z3="-0.1723276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13667038" y3="-3.29712502" z3="-1.03041087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49451039" y3="-4.45600865" z3="-0.61110859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99700555" y3="-4.50941161" z3="0.68537916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14347796" y3="-3.44818044" z3="1.57382909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77700669" y3="-2.29195787" z3="1.13618966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49336493" y3="-3.22817055" z3="-2.06134568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35492237" y3="-5.29863721" z3="-1.28884047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25982618" y3="-5.69729154" z3="1.11787416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73630324" y3="-3.52724839" z3="2.58288487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8688182" y3="-1.44217155" z3="1.81419704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48855993" y3="4.01919544" z3="0.05984163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8599247" y3="3.80894497" z3="0.00147009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40452361" y3="3.29552511" z3="-1.17063448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6193681" y3="3.01610126" z3="-2.28638438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24824536" y3="3.22390364" z3="-2.20823723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03830487" y3="4.37833231" z3="0.98847876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50430943" y3="4.01548325" z3="0.8566042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84083898" y3="3.01153555" z3="-1.22270634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0839486" y3="2.62689065" z3="-3.19316503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38119771" y3="2.98097971" z3="-3.06599357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16470537" y3="-5.90612679" z3="2.30628898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76763226" y3="-6.40179872" z3="0.25541199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33012197" y3="2.74789249" z3="-2.29994407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46263996" y3="3.03791742" z3="-0.17706265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6148033" y3="0.16117595" z3="-2.03474894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94007344" y3="1.40859833" z3="-1.89513186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79139912" y3="0.08809705" z3="-2.83052716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26611573" y3="1.19423464" z3="-3.490529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30600853" y3="-0.87373591" z3="-2.91782897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.16855169" y3="1.12576217" z3="-4.10430386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44001054" y3="2.52796446" z3="-2.61796804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57120576" y3="2.4236211" z3="-3.39129242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9091739" y3="3.48038535" z3="-2.56095275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.934022" y3="3.29715252" z3="-3.94031783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58067792" y3="3.90616312" z3="-0.25749033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76426176" y3="5.05836012" z3="-0.06115253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93267188" y3="3.95894416" z3="0.18484036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45415822" y3="5.10464258" z3="0.73610489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.56088178" y3="3.07137079" z3="0.08892129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49584062" y3="5.11909758" z3="1.06919694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33637576" y3="6.23378999" z3="0.49935443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65398018" y3="6.26303894" z3="0.883658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.70030327" y3="7.11466644" z3="0.63040928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0826558" y3="7.17085644" z3="1.31718325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34516704" y3="-3.93663233" z3="-2.87612571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52837315" y3="-4.97190486" z3="-2.55010462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21593475" y3="-3.6133341" z3="-3.47752218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46801117" y3="-3.93145974" z3="-3.54247524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6917458" y3="-1.60064878" z3="-2.09707223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42700832" y3="-1.12686806" z3="-2.77245689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52882578" y3="-0.93833136" z3="-1.23235107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74124809" y3="-1.6443274" z3="-2.65263622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9137,-.9553,-.6847;6.5936,-1.9525,-1.5565;6.0767,-.9979,-1.4184;4.7699,1.4764,-1.0705;4.284,.3112,-.5025;2.6511,2.7393,-1.1491;4.0023,2.7356,-.8505;2.3812,4.9972,-.3735;1.807,3.8555,-.8805;1.757,5.8739,-.1741;2.0812,1.614,-1.67;3.1275,.3602,.221;1.7094,.3861,-.6296;.6094,.7349,.304;1.6554,-.8543,-1.4934;1.0944,-2.4735,-1.316;2.056,-5.4916,-6.2605;1.782,-5.057,-5.2949;1.0648,-3.916,-2.843;1.747,-3.6765,-5.1482;1.4866,-5.8835,-4.208;1.1425,-5.3069,-2.9918;1.3974,-3.0742,-3.929;1.9843,-3.0093,-5.9805;1.538,-6.9712,-4.301;.9504,-5.94,-2.1214;.656,-3.3678,-1.6004;-.3448,-3.8518,-.8569;-.6859,-4.8548,-1.1262;-.3838,-3.5494,.5914;-.4214,-3.0737,3.3498;-.6916,-4.5843,1.4832;-.1141,-2.2723,1.0921;-.1296,-2.0368,2.4626;-.7017,-4.3488,2.8569;-.8813,-5.5927,1.1035;.0954,-1.4327,.4284;.0954,-1.0286,2.8211;-.908,-5.173,3.5446;-.4226,-2.8927,4.4287;1.3496,-1.7385,-3.9001;1.4752,-1.3318,-2.9971;.3358,3.7165,-1.0322;-2.1305,-2.988,-1.7136;-2.9195,-3.1635,-.5726;-3.1131,-2.2878,.3583;-3.8376,-.7202,.6124;-4.6912,-.2443,-.977;-2.5291,.4485,1.2125;-5.0887,-1.0594,1.962;-3.4041,-4.3741,-.3367;-4.1224,-4.6127,.8644;-3.9888,.0652,-1.7667;-5.3624,.613,-.7879;-5.3054,-1.0758,-1.3674;-1.637,.552,.5677;-2.1718,.1365,2.2094;-2.9952,1.4459,1.3158;-5.5506,-.1112,2.292;-5.9004,-1.7249,1.6189;-4.6056,-1.5232,2.8404;-5.0597,-4.032,.8787;-3.5122,-4.3565,1.7442;-4.3523,-5.6864,.8597;4.2771,-2.1967,-.1723;4.1367,-3.2971,-1.0304;3.4945,-4.456,-.6111;2.997,-4.5094,.6854;3.1435,-3.4482,1.5738;3.777,-2.292,1.1362;4.4934,-3.2282,-2.0613;3.3549,-5.2986,-1.2888;2.2598,-5.6973,1.1179;2.7363,-3.5272,2.5829;3.8688,-1.4422,1.8142;-.4886,4.0192,.0598;-1.8599,3.8089,.0015;-2.4045,3.2955,-1.1706;-1.6194,3.0161,-2.2864;-.2482,3.2239,-2.2082;-.0383,4.3783,.9885;-2.5043,4.0155,.8566;-3.8408,3.0115,-1.2227;-2.0839,2.6269,-3.1932;.3812,2.981,-3.066;2.1647,-5.9061,2.3063;1.7676,-6.4018,.2554;-4.3301,2.7479,-2.2999;-4.4626,3.0379,-.1771;6.6148,.1612,-2.0347;5.9401,1.4086,-1.8951;7.7914,.0881,-2.8305;8.2661,1.1942,-3.4905;8.306,-.8737,-2.9178;9.1686,1.1258,-4.1043;6.44,2.528,-2.618;7.5712,2.4236,-3.3913;5.9092,3.4804,-2.561;7.934,3.2972,-3.9403;4.5807,3.9062,-.2575;3.7643,5.0584,-.0612;5.9327,3.9589,.1848;6.4542,5.1046,.7361;6.5609,3.0714,.0889;7.4958,5.1191,1.0692;4.3364,6.2338,.4994;5.654,6.263,.8837;3.7003,7.1147,.6304;6.0827,7.1709,1.3172;-2.3452,-3.9366,-2.8761;-2.5284,-4.9719,-2.5501;-3.2159,-3.6133,-3.4775;-1.468,-3.9315,-3.5425;-1.6917,-1.6006,-2.0971;-2.427,-1.1269,-2.7725;-1.5288,-.9383,-1.2324;-.7412,-1.6443,-2.6526;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930148554</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000508307579 0.000088181968 0.016204026776 0.005257791583</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122194 -0.000030777 0.000052130 0.000202511 0.000308190 0.000382875 0.000434554 0.000557408 0.000686006 0.000768268 0.000976397 0.001038880 0.001187142 0.001315210 0.001420782 0.001591123 0.001634635 0.001768631 0.001984372 0.002165951 0.002396703 0.002564313 0.002834897 0.003036540 0.003426957 0.003667036 0.003943522 0.004511688 0.004806357 0.004961468 0.005183760 0.005362687 0.006049413 0.006435799 0.006468334 0.006889345 0.007070228 0.007397878 0.008186527 0.008729408 0.008834006 0.009501982 0.009773181 0.009880327 0.010953477 0.011178302 0.011897572 0.012619031 0.013382471 0.013750329 0.013995162 0.014625121 0.014912049 0.015424192 0.015900349 0.016311785 0.016664328 0.018626857 0.019265427 0.019414169 0.020202410 0.020534031 0.021551861 0.021773476 0.022450934 0.022804811 0.023492296 0.023811347 0.024525711 0.025904476 0.026627703 0.026950712 0.027161945 0.027519154 0.028352143 0.028993321 0.030690199 0.030973508 0.031579884 0.034180806 0.034766269 0.036030397 0.039059331 0.039535955 0.041988415 0.045423425 0.046137632 0.046763619 0.048860482 0.049698882 0.050044939 0.050841975 0.051546580 0.052193263 0.052289252 0.052414464 0.053009749 0.053632477 0.055002067 0.056112602 0.056444108 0.056729432 0.057016534 0.057187028 0.057793544 0.058629315 0.059263611 0.059767346 0.061358683 0.062149313 0.062937520 0.064320842 0.064583586 0.065107065 0.066046082 0.067574443 0.067897025 0.069009063 0.070523764 0.072013751 0.072408414 0.072854683 0.072981433 0.073618530 0.078708121 0.080725214 0.081917043 0.083215238 0.083955942 0.084687982 0.088971815 0.089429202 0.089831543 0.091326763 0.093335888 0.094581891 0.095499579 0.096293109 0.096865123 0.098540892 0.100167841 0.100705061 0.102764445 0.103981437 0.104584376 0.106822728 0.109218934 0.111047349 0.112313304 0.112871890 0.113955351 0.114817229 0.117012486 0.117390655 0.118635455 0.119233266 0.120675654 0.122267320 0.125113772 0.125877152 0.128557767 0.129034652 0.131054340 0.133855986 0.136558020 0.137798726 0.138613788 0.139659839 0.140475064 0.143446428 0.144612597 0.145914118 0.146811268 0.151999573 0.153604642 0.154159968 0.160159685 0.160874670 0.168571238 0.171463470 0.176109148 0.179114303 0.181634425 0.184519763 0.189134661 0.190292060 0.191988287 0.201360828 0.202239035 0.206302116 0.206967262 0.207268852 0.212428269 0.212592466 0.215633174 0.217000383 0.220438014 0.220962054 0.224615248 0.225144579 0.227152023 0.231894020 0.234602063 0.236029042 0.238580697 0.246367646 0.248707190 0.252566732 0.256564059 0.257230216 0.258329549 0.262580232 0.271582088 0.282929794 0.292036436 0.300122120 0.300199668 0.301089559 0.307145661 0.307796165 0.309854671 0.320029032 0.321368228 0.326464939 0.330895391 0.336679722 0.347772077 0.352033738 0.355654074 0.360886461 0.362106909 0.364156110 0.384574860 0.407239414 0.414484236 0.430280954 0.431907398 0.435394371 0.451130707 0.464753549 0.475683219 0.478870333 0.480471510 0.486553977 0.498904654 0.503919628 0.515220176 0.518061092 0.543838010 0.566939851 0.567736411 0.586763462 0.591952469 0.605886640 0.644282671 0.645544044 0.668090500 0.675641763 0.687423048 0.704116139 0.704329447 0.704657840 0.711030464 0.717275748 0.734292756 0.738034016 0.739772607 0.747274312 0.750848209 0.771616747 0.775989696 0.809162221 0.821854241 0.824154113 0.828943397 0.834304916 0.848120036 0.849547191 0.851414044 0.854643881 0.863480865 0.867474370 0.875940532 0.887560373 0.891196609 0.892400542 0.893659878 0.902132231 0.910334091 0.918016681 0.922980362 0.924577109 0.932020729 0.935865845 0.956137535 0.962890950 0.965338225 0.970094471 0.977677392 0.982592860 0.998660683 1.012994825 1.016307362 1.021928524 1.040223938 1.055126596 1.071300683 1.073116554 1.079740812 1.087413058 1.108543981 1.110439124 1.118288515 1.119236977 1.122635838 1.123983958 1.141898892 1.149753684 1.161768653 1.170198368 1.177302066 1.188550455 1.200775660 1.222127692 1.234204704 1.258233260 1.296501457 1.298419036 1.314748449 1.326483453 1.327542076 1.330258627 1.331438667 1.334806753 1.342457841 1.349210181 1.368756037 1.380013462 1.381341033 1.381885596 1.429609820 1.514723565 1.557993591 1.684837192 1.922939437</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">277</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91500553" y3="-0.95548181" z3="-0.68545386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59620453" y3="-1.95185166" z3="-1.55567909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07918355" y3="-0.99736223" z3="-1.41726114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7717692" y3="1.47663893" z3="-1.06853998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28483632" y3="0.3106299" z3="-0.50304194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65305918" y3="2.7387456" z3="-1.15154826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00333783" y3="2.73527032" z3="-0.84911834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37998826" y3="4.99560552" z3="-0.37403292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80755221" y3="3.8542211" z3="-0.88399593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75498396" y3="5.87184261" z3="-0.17545803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08525173" y3="1.61353814" z3="-1.67501939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1266721" y3="0.35862108" z3="0.21787712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71045852" y3="0.38555795" z3="-0.63576194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60867195" y3="0.7352022" z3="0.2954178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65757013" y3="-0.85476885" z3="-1.49979352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09393148" y3="-2.47316991" z3="-1.31969705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04012211" y3="-5.49401127" z3="-6.26564474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76936298" y3="-5.05879097" z3="-5.29942615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06007923" y3="-3.91622846" z3="-2.84610153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73515444" y3="-3.67823459" z3="-5.15343935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4773508" y3="-5.88463194" z3="-4.21103115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13721859" y3="-5.30724355" z3="-2.99413103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38948529" y3="-3.07517305" z3="-3.93351486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96985383" y3="-3.01154193" z3="-5.9868662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52829678" y3="-6.97240822" z3="-4.30362031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94748482" y3="-5.93978324" z3="-2.12279801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65423606" y3="-3.36717535" z3="-1.60288323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34533284" y3="-3.85062391" z3="-0.85710002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68711272" y3="-4.85382311" z3="-1.12502226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38133768" y3="-3.54721503" z3="0.59110058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41284639" y3="-3.06949033" z3="3.34926815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68627248" y3="-4.58170153" z3="1.48434272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11178852" y3="-2.26935898" z3="1.09029344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12424539" y3="-2.03277572" z3="2.4605674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69337807" y3="-4.34501407" z3="2.85781611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87611576" y3="-5.59039283" z3="1.10573727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09515446" y3="-1.4298765" z3="0.42557443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10088914" y3="-1.0242393" z3="2.81793033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89730868" y3="-5.16896414" z3="3.54669195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41175956" y3="-2.88750986" z3="4.42795749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3420633" y3="-1.73937357" z3="-3.90514865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47099832" y3="-1.33249453" z3="-3.0026577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33684873" y3="3.71466024" z3="-1.03918557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13229165" y3="-2.98728806" z3="-1.7112054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91938046" y3="-3.16245254" z3="-0.56884116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1119171" y3="-2.28593001" z3="0.36165613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83790751" y3="-0.71919896" z3="0.61557944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69880261" y3="-0.24815656" z3="-0.97118925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52904956" y3="0.45322426" z3="1.20756746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08200376" y3="-1.0580067" z3="1.97172431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40305368" y3="-4.37311658" z3="-0.33126921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11918564" y3="-4.6106553" z3="0.87129551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99989082" y3="0.05531065" z3="-1.76623507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36589047" y3="0.61241736" z3="-0.78216013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31806128" y3="-1.07935322" z3="-1.35417658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64031992" y3="0.55769583" z3="0.55850328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16603389" y3="0.14346235" z3="2.20309116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99667697" y3="1.44981856" z3="1.31182998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54238811" y3="-0.10992108" z3="2.30420058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89526702" y3="-1.72394457" z3="1.63342803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59363711" y3="-1.52128219" z3="2.84740415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05581966" y3="-4.029319" z3="0.88732808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50728537" y3="-4.35427224" z3="1.74996131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34945487" y3="-5.68432893" z3="0.86762704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27769625" y3="-2.19729503" z3="-0.17476142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1360932" y3="-3.29645808" z3="-1.034167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49382872" y3="-4.45564154" z3="-0.6157422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99772395" y3="-4.51056867" z3="0.68124342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.145151" y3="-3.45043696" z3="1.57082074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77852774" y3="-2.29384085" z3="1.13396258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.492096" y3="-3.22626807" z3="-2.06525865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35330652" y3="-5.2974197" z3="-1.29437342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26136517" y3="-5.69915373" z3="1.11332256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73892919" y3="-3.53069016" z3="2.58016984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87122811" y3="-1.44491308" z3="1.81286025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49025676" y3="4.01981376" z3="0.05014591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86137532" y3="3.80879313" z3="-0.01076517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40297429" y3="3.29156615" z3="-1.18250403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61511583" y3="3.00970203" z3="-2.29572849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24435005" y3="3.21890419" z3="-2.21528718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04239714" y3="4.38153465" z3="0.97889988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50784845" y3="4.01738181" z3="0.8422635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83895525" y3="3.00629447" z3="-1.2368447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07734004" y3="2.61754716" z3="-3.20239949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38704132" y3="2.97425908" z3="-3.07103438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16804059" y3="-5.90954574" z3="2.30162357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76800463" y3="-6.4026822" z3="0.25073406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32491655" y3="2.7351799" z3="-2.3137026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46389046" y3="3.03938633" z3="-0.19326667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61861472" y3="0.16261459" z3="-2.03091512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94377513" y3="1.40993683" z3="-1.89070413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79680494" y3="0.09065606" z3="-2.82443674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27306085" y3="1.19782088" z3="-3.48161214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31147268" y3="-0.87110959" z3="-2.91227016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17675867" y3="1.1302123" z3="-4.09362718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44538737" y3="2.53043792" z3="-2.61061104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57818243" y3="2.42719133" z3="-3.38173774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9145754" y3="3.48286034" z3="-2.55311703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94230614" y3="3.30158985" z3="-3.92851132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57950037" y3="3.90528959" z3="-0.25292378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76201701" y3="5.05688435" z3="-0.05742377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9300758" y3="3.95791933" z3="0.19362878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44928591" y3="5.10292138" z3="0.74851814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55893398" y3="3.07072771" z3="0.09808558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48983924" y3="5.11727756" z3="1.08502207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33187874" y3="6.23166111" z3="0.50675462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64816263" y3="6.26075494" z3="0.89544868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69505763" y3="7.11209063" z3="0.63720133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07503596" y3="7.1680051" z3="1.33194474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34901261" y3="-3.93654449" z3="-2.87294495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53167331" y3="-4.97164002" z3="-2.54604961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22081128" y3="-3.61346547" z3="-3.47288797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47312113" y3="-3.93178291" z3="-3.54095969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69445336" y3="-1.59998708" z3="-2.09610138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43041263" y3="-1.12690048" z3="-2.77123246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5310141" y3="-0.9369618" z3="-1.2320353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74443597" y3="-1.64376858" z3="-2.65247489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.915,-.9555,-.6855;6.5962,-1.9519,-1.5557;6.0792,-.9974,-1.4173;4.7718,1.4766,-1.0685;4.2848,.3106,-.503;2.6531,2.7387,-1.1515;4.0033,2.7353,-.8491;2.38,4.9956,-.374;1.8076,3.8542,-.884;1.755,5.8718,-.1755;2.0853,1.6135,-1.675;3.1267,.3586,.2179;1.7105,.3856,-.6358;.6087,.7352,.2954;1.6576,-.8548,-1.4998;1.0939,-2.4732,-1.3197;2.0401,-5.494,-6.2656;1.7694,-5.0588,-5.2994;1.0601,-3.9162,-2.8461;1.7352,-3.6782,-5.1534;1.4774,-5.8846,-4.211;1.1372,-5.3072,-2.9941;1.3895,-3.0752,-3.9335;1.9699,-3.0115,-5.9869;1.5283,-6.9724,-4.3036;.9475,-5.9398,-2.1228;.6542,-3.3672,-1.6029;-.3453,-3.8506,-.8571;-.6871,-4.8538,-1.125;-.3813,-3.5472,.5911;-.4128,-3.0695,3.3493;-.6863,-4.5817,1.4843;-.1118,-2.2694,1.0903;-.1242,-2.0328,2.4606;-.6934,-4.345,2.8578;-.8761,-5.5904,1.1057;.0952,-1.4299,.4256;.1009,-1.0242,2.8179;-.8973,-5.169,3.5467;-.4118,-2.8875,4.428;1.3421,-1.7394,-3.9051;1.471,-1.3325,-3.0027;.3368,3.7147,-1.0392;-2.1323,-2.9873,-1.7112;-2.9194,-3.1625,-.5688;-3.1119,-2.2859,.3617;-3.8379,-.7192,.6156;-4.6988,-.2482,-.9712;-2.529,.4532,1.2076;-5.082,-1.058,1.9717;-3.4031,-4.3731,-.3313;-4.1192,-4.6107,.8713;-3.9999,.0553,-1.7662;-5.3659,.6124,-.7822;-5.3181,-1.0794,-1.3542;-1.6403,.5577,.5585;-2.166,.1435,2.2031;-2.9967,1.4498,1.3118;-5.5424,-.1099,2.3042;-5.8953,-1.7239,1.6334;-4.5936,-1.5213,2.8474;-5.0558,-4.0293,.8873;-3.5073,-4.3543,1.75;-4.3495,-5.6843,.8676;4.2777,-2.1973,-.1748;4.1361,-3.2965,-1.0342;3.4938,-4.4556,-.6157;2.9977,-4.5106,.6812;3.1452,-3.4504,1.5708;3.7785,-2.2938,1.134;4.4921,-3.2263,-2.0653;3.3533,-5.2974,-1.2944;2.2614,-5.6992,1.1133;2.7389,-3.5307,2.5802;3.8712,-1.4449,1.8129;-.4903,4.0198,.0501;-1.8614,3.8088,-.0108;-2.403,3.2916,-1.1825;-1.6151,3.0097,-2.2957;-.2444,3.2189,-2.2153;-.0424,4.3815,.9789;-2.5078,4.0174,.8423;-3.839,3.0063,-1.2368;-2.0773,2.6175,-3.2024;.387,2.9743,-3.071;2.168,-5.9095,2.3016;1.768,-6.4027,.2507;-4.3249,2.7352,-2.3137;-4.4639,3.0394,-.1933;6.6186,.1626,-2.0309;5.9438,1.4099,-1.8907;7.7968,.0907,-2.8244;8.2731,1.1978,-3.4816;8.3115,-.8711,-2.9123;9.1768,1.1302,-4.0936;6.4454,2.5304,-2.6106;7.5782,2.4272,-3.3817;5.9146,3.4829,-2.5531;7.9423,3.3016,-3.9285;4.5795,3.9053,-.2529;3.762,5.0569,-.0574;5.9301,3.9579,.1936;6.4493,5.1029,.7485;6.5589,3.0707,.0981;7.4898,5.1173,1.085;4.3319,6.2317,.5068;5.6482,6.2608,.8954;3.6951,7.1121,.6372;6.075,7.168,1.3319;-2.349,-3.9365,-2.8729;-2.5317,-4.9716,-2.546;-3.2208,-3.6135,-3.4729;-1.4731,-3.9318,-3.541;-1.6945,-1.6,-2.0961;-2.4304,-1.1269,-2.7712;-1.531,-.937,-1.232;-.7444,-1.6438,-2.6525;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931740822</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000252811409 0.000040900722 0.021817519396 0.004833142475</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001779982962 0.001186655308</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123473 -0.000015195 0.000058066 0.000203603 0.000301751 0.000384058 0.000429212 0.000553616 0.000689962 0.000763358 0.000970656 0.001038247 0.001186145 0.001314063 0.001420153 0.001600271 0.001634084 0.001771259 0.001982599 0.002164380 0.002381140 0.002568954 0.002829706 0.003040714 0.003420999 0.003668819 0.003941677 0.004511494 0.004806611 0.004957111 0.005183045 0.005362994 0.006046024 0.006436053 0.006468574 0.006896128 0.007066974 0.007395614 0.008187540 0.008728793 0.008832584 0.009503251 0.009774971 0.009880654 0.010952445 0.011180198 0.011896307 0.012623321 0.013384751 0.013745496 0.014003888 0.014625439 0.014910735 0.015424598 0.015901222 0.016301957 0.016665574 0.018628073 0.019262904 0.019414272 0.020199580 0.020532810 0.021552253 0.021769434 0.022449655 0.022805876 0.023492465 0.023811520 0.024526684 0.025904299 0.026628019 0.026950238 0.027161782 0.027518133 0.028351818 0.028998785 0.030638585 0.030975188 0.031579914 0.034183468 0.034768105 0.036030648 0.039059994 0.039536276 0.041990230 0.045423664 0.046137469 0.046761126 0.048858712 0.049698873 0.050050017 0.050841944 0.051546857 0.052193880 0.052289272 0.052414525 0.053009995 0.053633602 0.055002002 0.056112625 0.056444493 0.056729535 0.057016581 0.057187382 0.057794074 0.058629354 0.059264202 0.059768146 0.061359080 0.062149827 0.062937514 0.064321700 0.064584033 0.065107591 0.066046057 0.067575385 0.067893623 0.069010836 0.070529300 0.072011392 0.072402469 0.072850014 0.072982809 0.073573619 0.078706616 0.080713724 0.081928079 0.083192503 0.083905821 0.084673889 0.088971336 0.089429636 0.089831466 0.091327997 0.093335951 0.094582081 0.095499870 0.096293270 0.096865743 0.098548224 0.100172101 0.100705144 0.102767857 0.103983054 0.104599085 0.106827122 0.109222236 0.111050259 0.112313253 0.112872773 0.113960070 0.114817222 0.117014555 0.117400530 0.118637835 0.119232482 0.120677563 0.122265164 0.125115871 0.125875858 0.128561940 0.129040142 0.131056939 0.133856895 0.136567974 0.137804216 0.138613905 0.139660325 0.140472863 0.143444766 0.144610023 0.145913609 0.146811829 0.152001803 0.153606172 0.154158447 0.160142234 0.160875209 0.168572450 0.171463687 0.176126094 0.179114966 0.181635824 0.184522503 0.189136160 0.190303045 0.191987967 0.201361827 0.202239509 0.206303131 0.206967339 0.207268936 0.212431656 0.212593746 0.215633686 0.217004254 0.220441467 0.220961393 0.224617122 0.225145030 0.227152735 0.231895460 0.234602871 0.236048360 0.238581775 0.246365481 0.248697774 0.252585229 0.256564246 0.257230640 0.258329740 0.262579684 0.271582266 0.282929860 0.292036959 0.300124705 0.300206456 0.301092744 0.307146344 0.307796349 0.309854671 0.320026812 0.321369506 0.326465101 0.330908648 0.336680632 0.347772049 0.352033531 0.355653941 0.360886048 0.362106916 0.364156304 0.384575263 0.407239106 0.414483426 0.430284019 0.431905659 0.435397583 0.451132381 0.464754472 0.475683689 0.478872759 0.480475516 0.486553977 0.498905071 0.503917463 0.515219989 0.518060765 0.543840190 0.566940340 0.567736593 0.586766794 0.591945193 0.605886606 0.644292792 0.645544750 0.668090478 0.675640424 0.687423099 0.704116064 0.704327133 0.704643520 0.711045084 0.717276145 0.734295330 0.738034009 0.739774123 0.747273718 0.750849364 0.771616763 0.775989758 0.809162413 0.821854677 0.824155875 0.828943660 0.834304963 0.848138157 0.849548663 0.851414331 0.854644296 0.863484431 0.867474445 0.875940938 0.887564106 0.891238884 0.892401347 0.893668880 0.902132735 0.910339537 0.918015017 0.922976693 0.924577166 0.932021183 0.935891824 0.956136422 0.962890993 0.965340922 0.970096922 0.977662493 0.982592767 0.998661420 1.012997219 1.016307412 1.021929274 1.040226034 1.055126833 1.071301377 1.073117067 1.079749029 1.087415195 1.108544089 1.110439269 1.118290853 1.119238198 1.122635909 1.123984396 1.141898910 1.149765780 1.161768756 1.170198421 1.177302274 1.188572345 1.200776644 1.222130865 1.234206192 1.258233959 1.296503270 1.298442841 1.314749020 1.326483475 1.327540856 1.330257836 1.331439951 1.334808523 1.342460765 1.349211667 1.368773286 1.380013740 1.381341248 1.381887321 1.429608993 1.514652950 1.557993442 1.684837386 1.922939544</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">278</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91289429" y3="-0.95590493" z3="-0.6882503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59360965" y3="-1.9514926" z3="-1.56040007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0764391" y3="-0.99719578" z3="-1.42116863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76912669" y3="1.47639944" z3="-1.06994025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28260751" y3="0.31001894" z3="-0.50487363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65070835" y3="2.73893721" z3="-1.15017056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00112423" y3="2.73489477" z3="-0.8486816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37865619" y3="4.99470567" z3="-0.36870959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80559247" y3="3.85419509" z3="-0.88000952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75396527" y3="5.87074131" z3="-0.16816923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08249191" y3="1.6144062" z3="-1.67477233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12476291" y3="0.35764115" z3="0.21657629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70829243" y3="0.38537865" z3="-0.63654641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60689982" y3="0.73450787" z3="0.29524244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65501704" y3="-0.85440457" z3="-1.50120439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09473728" y3="-2.47445701" z3="-1.31977996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04186132" y3="-5.49855799" z3="-6.26376175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77116888" y3="-5.06276457" z3="-5.29780554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06181185" y3="-3.91871793" z3="-2.8452738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73672196" y3="-3.68210519" z3="-5.15275214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47945488" y3="-5.88798103" z3="-4.20882907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13928874" y3="-5.30986248" z3="-2.99232635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39109716" y3="-3.0782922" z3="-3.93320829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97118791" y3="-3.01587299" z3="-5.98662097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53061019" y3="-6.97581757" z3="-4.3006827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94983572" y3="-5.94193715" z3="-2.12059397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65569885" y3="-3.36874709" z3="-1.6025424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34278607" y3="-3.85322672" z3="-0.85571172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68409658" y3="-4.85670991" z3="-1.12308954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37890552" y3="-3.54883121" z3="0.59219488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40901935" y3="-3.06935726" z3="3.34992625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68140247" y3="-4.58323362" z3="1.48609784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11190817" y3="-2.26976102" z3="1.09033221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12380321" y3="-2.03218981" z3="2.46039289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68791682" y3="-4.34542969" z3="2.85933813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86996383" y3="-5.59233038" z3="1.10807151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09279576" y3="-1.4303405" z3="0.42489233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09954121" y3="-1.02302036" z3="2.81701388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8893664" y3="-5.169492" z3="3.54901686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40759206" y3="-2.88652121" z3="4.42842055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34373058" y3="-1.7425004" z3="-3.90580236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47099778" y3="-1.33473134" z3="-3.00351108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33465949" y3="3.71586169" z3="-1.03418789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13163761" y3="-2.99179355" z3="-1.71115444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91770389" y3="-3.16275368" z3="-0.56762419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11017203" y3="-2.28212755" z3="0.35927675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83571818" y3="-0.7146292" z3="0.60861234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68632357" y3="-0.24076225" z3="-0.98285528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5273951" y3="0.45389658" z3="1.20933545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09064642" y3="-1.05097026" z3="1.95571379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40093401" y3="-4.37278449" z3="-0.32480589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11609819" y3="-4.6045203" z3="0.87939541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98288878" y3="0.06780814" z3="-1.7718615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35782887" y3="0.61674597" z3="-0.79530652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30022353" y3="-1.07263324" z3="-1.37317749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6345155" y3="0.55578537" z3="0.56560855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17174029" y3="0.14281032" z3="2.20718454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99284604" y3="1.45183262" z3="1.31067104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55174668" y3="-0.10171143" z3="2.28365925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90261406" y3="-1.715553" z3="1.61161051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61009277" y3="-1.51434933" z3="2.8356418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05107344" y3="-4.02140689" z3="0.89468474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50307123" y3="-4.34556315" z3="1.7566119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34762674" y3="-5.67814148" z3="0.88021586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27672801" y3="-2.19808056" z3="-0.17697042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13615377" y3="-3.29788226" z3="-1.03571522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49546077" y3="-4.45762753" z3="-0.61643865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99966531" y3="-4.51237538" z3="0.68067724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14603904" y3="-3.45160902" z3="1.56959989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77801502" y3="-2.29457829" z3="1.13195703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49186097" y3="-3.22795078" z3="-2.06693462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35595636" y3="-5.300056" z3="-1.2945134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26512391" y3="-5.70181815" z3="1.11369987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74023632" y3="-3.53180162" z3="2.57912632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8702271" y3="-1.4455211" z3="1.81053356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49143795" y3="4.02104687" z3="0.05591198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86295743" y3="3.81211657" z3="-0.00441008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40600148" y3="3.2972775" z3="-1.17640644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61917974" y3="3.01542055" z3="-2.29038814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24796563" y3="3.22215942" z3="-2.21052773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04254492" y3="4.38122898" z3="0.9847385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50867403" y3="4.02070754" z3="0.84920848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84254617" y3="3.01471546" z3="-1.23034048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0825419" y3="2.6251958" z3="-3.19729297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38276225" y3="2.97710421" z3="-3.0666309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1730719" y3="-5.91211545" z3="2.30213111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77182621" y3="-6.40609217" z3="0.25167782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33084568" y3="2.75211445" z3="-2.3081939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46546817" y3="3.04099525" z3="-0.18530028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61512078" y3="0.16314496" z3="-2.03480777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94037409" y3="1.41035287" z3="-1.89312756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79250966" y3="0.0918076" z3="-2.8295788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2680157" y3="1.19948831" z3="-3.48644335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30715919" y3="-0.86987168" z3="-2.91863764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17108038" y3="1.13235884" z3="-4.09943615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44120582" y3="2.5314481" z3="-2.61264245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57322177" y3="2.42880615" z3="-3.38496094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91037483" y3="3.48379955" z3="-2.55387887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93676974" y3="3.30363022" z3="-3.93143997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57801275" y3="3.90390876" z3="-0.25124302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76092594" y3="5.05535126" z3="-0.05330107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92885994" y3="3.95565287" z3="0.19437776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4486881" y3="5.09976576" z3="0.75050822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5574167" y3="3.06847814" z3="0.09726457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48939016" y3="5.11348031" z3="1.08631231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3314383" y3="6.22921636" z3="0.51206215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6479813" y3="6.2575345" z3="0.89969943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69490579" y3="7.10953843" z3="0.64429697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07538197" y3="7.16406989" z3="1.33712302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34916107" y3="-3.94537756" z3="-2.86930558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53344379" y3="-4.97885741" z3="-2.53811151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2202131" y3="-3.62340671" z3="-3.47074917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47320211" y3="-3.94462931" z3="-3.53735332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69361171" y3="-1.60596218" z3="-2.10141823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42952209" y3="-1.13555275" z3="-2.77844333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53002952" y3="-0.93941928" z3="-1.23997676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74368007" y3="-1.65174444" z3="-2.65760343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9129,-.9559,-.6883;6.5936,-1.9515,-1.5604;6.0764,-.9972,-1.4212;4.7691,1.4764,-1.0699;4.2826,.31,-.5049;2.6507,2.7389,-1.1502;4.0011,2.7349,-.8487;2.3787,4.9947,-.3687;1.8056,3.8542,-.88;1.754,5.8707,-.1682;2.0825,1.6144,-1.6748;3.1248,.3576,.2166;1.7083,.3854,-.6365;.6069,.7345,.2952;1.655,-.8544,-1.5012;1.0947,-2.4745,-1.3198;2.0419,-5.4986,-6.2638;1.7712,-5.0628,-5.2978;1.0618,-3.9187,-2.8453;1.7367,-3.6821,-5.1528;1.4795,-5.888,-4.2088;1.1393,-5.3099,-2.9923;1.3911,-3.0783,-3.9332;1.9712,-3.0159,-5.9866;1.5306,-6.9758,-4.3007;.9498,-5.9419,-2.1206;.6557,-3.3687,-1.6025;-.3428,-3.8532,-.8557;-.6841,-4.8567,-1.1231;-.3789,-3.5488,.5922;-.409,-3.0694,3.3499;-.6814,-4.5832,1.4861;-.1119,-2.2698,1.0903;-.1238,-2.0322,2.4604;-.6879,-4.3454,2.8593;-.87,-5.5923,1.1081;.0928,-1.4303,.4249;.0995,-1.023,2.817;-.8894,-5.1695,3.549;-.4076,-2.8865,4.4284;1.3437,-1.7425,-3.9058;1.471,-1.3347,-3.0035;.3347,3.7159,-1.0342;-2.1316,-2.9918,-1.7112;-2.9177,-3.1628,-.5676;-3.1102,-2.2821,.3593;-3.8357,-.7146,.6086;-4.6863,-.2408,-.9829;-2.5274,.4539,1.2093;-5.0906,-1.051,1.9557;-3.4009,-4.3728,-.3248;-4.1161,-4.6045,.8794;-3.9829,.0678,-1.7719;-5.3578,.6167,-.7953;-5.3002,-1.0726,-1.3732;-1.6345,.5558,.5656;-2.1717,.1428,2.2072;-2.9928,1.4518,1.3107;-5.5517,-.1017,2.2837;-5.9026,-1.7156,1.6116;-4.6101,-1.5143,2.8356;-5.0511,-4.0214,.8947;-3.5031,-4.3456,1.7566;-4.3476,-5.6781,.8802;4.2767,-2.1981,-.177;4.1362,-3.2979,-1.0357;3.4955,-4.4576,-.6164;2.9997,-4.5124,.6807;3.146,-3.4516,1.5696;3.778,-2.2946,1.132;4.4919,-3.228,-2.0669;3.356,-5.3001,-1.2945;2.2651,-5.7018,1.1137;2.7402,-3.5318,2.5791;3.8702,-1.4455,1.8105;-.4914,4.021,.0559;-1.863,3.8121,-.0044;-2.406,3.2973,-1.1764;-1.6192,3.0154,-2.2904;-.248,3.2222,-2.2105;-.0425,4.3812,.9847;-2.5087,4.0207,.8492;-3.8425,3.0147,-1.2303;-2.0825,2.6252,-3.1973;.3828,2.9771,-3.0666;2.1731,-5.9121,2.3021;1.7718,-6.4061,.2517;-4.3308,2.7521,-2.3082;-4.4655,3.041,-.1853;6.6151,.1631,-2.0348;5.9404,1.4104,-1.8931;7.7925,.0918,-2.8296;8.268,1.1995,-3.4864;8.3072,-.8699,-2.9186;9.1711,1.1324,-4.0994;6.4412,2.5314,-2.6126;7.5732,2.4288,-3.385;5.9104,3.4838,-2.5539;7.9368,3.3036,-3.9314;4.578,3.9039,-.2512;3.7609,5.0554,-.0533;5.9289,3.9557,.1944;6.4487,5.0998,.7505;6.5574,3.0685,.0973;7.4894,5.1135,1.0863;4.3314,6.2292,.5121;5.648,6.2575,.8997;3.6949,7.1095,.6443;6.0754,7.1641,1.3371;-2.3492,-3.9454,-2.8693;-2.5334,-4.9789,-2.5381;-3.2202,-3.6234,-3.4707;-1.4732,-3.9446,-3.5374;-1.6936,-1.606,-2.1014;-2.4295,-1.1356,-2.7784;-1.53,-.9394,-1.24;-.7437,-1.6517,-2.6576;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930085204</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000499067152 0.000077655176 0.019983593868 0.005411925034</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123912 -0.000008310 0.000047694 0.000214222 0.000285326 0.000387166 0.000467561 0.000555203 0.000690609 0.000758799 0.000969849 0.001040303 0.001190990 0.001307791 0.001418241 0.001590882 0.001624056 0.001771504 0.001964582 0.002140992 0.002356997 0.002578190 0.002824447 0.003042842 0.003421749 0.003666435 0.003939294 0.004511021 0.004804283 0.004961480 0.005183238 0.005358367 0.006033964 0.006435308 0.006467489 0.006897977 0.007063296 0.007395238 0.008188819 0.008727287 0.008834869 0.009499987 0.009767552 0.009881139 0.010957748 0.011179597 0.011894039 0.012625701 0.013385295 0.013737314 0.014004608 0.014625377 0.014908505 0.015424266 0.015901936 0.016296225 0.016665534 0.018629459 0.019256209 0.019414864 0.020204435 0.020533192 0.021552397 0.021770317 0.022449686 0.022806512 0.023493107 0.023812370 0.024527830 0.025904494 0.026625467 0.026949168 0.027164095 0.027516736 0.028352490 0.028999249 0.030624563 0.030975507 0.031580954 0.034184101 0.034769232 0.036030742 0.039060836 0.039535287 0.041992414 0.045423143 0.046134248 0.046751539 0.048859257 0.049698808 0.050051167 0.050841973 0.051547055 0.052193831 0.052289280 0.052414602 0.053009992 0.053633914 0.055001930 0.056112747 0.056444570 0.056729886 0.057016498 0.057183686 0.057794570 0.058629703 0.059264916 0.059768184 0.061359409 0.062150063 0.062937211 0.064322554 0.064584530 0.065107952 0.066046404 0.067575451 0.067891560 0.069011648 0.070530705 0.071979535 0.072392075 0.072845195 0.072983186 0.073555439 0.078707484 0.080712362 0.081940217 0.083187908 0.083893515 0.084668972 0.088970457 0.089430030 0.089831519 0.091328251 0.093336070 0.094581986 0.095500054 0.096293535 0.096866467 0.098549026 0.100177629 0.100704928 0.102769913 0.103983783 0.104603373 0.106829992 0.109225116 0.111051263 0.112313599 0.112873329 0.113967346 0.114815908 0.117014826 0.117407106 0.118639627 0.119227957 0.120679041 0.122264682 0.125108550 0.125875463 0.128565455 0.129040433 0.131059184 0.133857872 0.136570765 0.137803241 0.138613753 0.139660882 0.140472114 0.143444735 0.144609074 0.145913750 0.146812355 0.152001576 0.153604527 0.154158019 0.160130270 0.160873149 0.168573005 0.171463719 0.176131011 0.179115011 0.181637396 0.184523206 0.189136667 0.190309052 0.191986975 0.201362702 0.202239564 0.206303211 0.206967328 0.207269012 0.212433137 0.212594286 0.215633458 0.217006351 0.220442881 0.220960597 0.224617537 0.225146138 0.227155698 0.231896124 0.234603266 0.236061492 0.238582742 0.246363200 0.248684739 0.252601116 0.256564200 0.257230612 0.258330098 0.262579653 0.271582286 0.282929410 0.292037513 0.300123712 0.300204263 0.301093281 0.307147197 0.307796543 0.309854658 0.320022735 0.321370035 0.326465123 0.330912813 0.336681063 0.347771765 0.352033293 0.355653814 0.360885765 0.362107034 0.364156330 0.384575351 0.407238949 0.414483425 0.430284086 0.431905364 0.435396902 0.451132619 0.464754481 0.475682089 0.478873287 0.480477162 0.486554275 0.498905220 0.503916540 0.515219794 0.518060756 0.543842082 0.566941011 0.567736718 0.586767334 0.591942761 0.605886258 0.644296809 0.645545299 0.668090502 0.675639497 0.687422780 0.704112228 0.704320286 0.704619371 0.711046546 0.717276233 0.734296780 0.738034039 0.739772920 0.747274310 0.750850339 0.771616763 0.775989876 0.809162612 0.821855038 0.824156390 0.828943790 0.834305101 0.848153915 0.849548850 0.851414788 0.854645420 0.863487538 0.867474454 0.875941054 0.887566859 0.891248587 0.892397771 0.893674476 0.902133539 0.910340348 0.918014998 0.922955042 0.924576372 0.932021199 0.935898540 0.956136446 0.962890801 0.965341258 0.970097131 0.977648816 0.982592777 0.998661806 1.012998578 1.016307076 1.021929697 1.040226719 1.055126915 1.071302117 1.073117343 1.079749684 1.087415575 1.108543771 1.110439305 1.118294672 1.119240409 1.122635975 1.123984909 1.141898848 1.149782612 1.161768645 1.170198389 1.177302830 1.188593085 1.200776919 1.222129553 1.234207290 1.258234512 1.296503335 1.298453223 1.314749177 1.326483616 1.327542598 1.330257275 1.331440427 1.334809337 1.342461930 1.349211681 1.368783260 1.380013767 1.381341470 1.381887120 1.429611138 1.514638077 1.557993138 1.684837323 1.922938416</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">279</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91569888" y3="-0.95517905" z3="-0.68419638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59619735" y3="-1.95196358" z3="-1.55534745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07926351" y3="-0.99741103" z3="-1.4169877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77194623" y3="1.47671532" z3="-1.06872744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28563986" y3="0.31103691" z3="-0.50198824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65304022" y3="2.7384726" z3="-1.15076748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00356908" y3="2.73540872" z3="-0.84960632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38045487" y3="4.9960775" z3="-0.37489521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80769686" y3="3.85416097" z3="-0.88330539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75556454" y3="5.87244029" z3="-0.17650488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08478021" y3="1.61287639" z3="-1.67286435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12807804" y3="0.35944856" z3="0.21986851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71125039" y3="0.38525084" z3="-0.63271567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60988651" y3="0.73458231" z3="0.29901452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65841143" y3="-0.85539997" z3="-1.49624317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0946895" y3="-2.47369695" z3="-1.31754879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04431363" y3="-5.49115937" z3="-6.26487161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77289998" y3="-5.05656768" z3="-5.29856909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06184907" y3="-3.9155871" z3="-2.84508274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73861438" y3="-3.67607895" z3="-5.15174804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48012946" y3="-5.88312887" z3="-4.21091396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13911745" y3="-5.30653083" z3="-2.99388891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39210467" y3="-3.07382592" z3="-3.93170084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97389002" y3="-3.00882213" z3="-5.98457047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53113129" y3="-6.97085082" z3="-4.30418374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94871555" y3="-5.93963061" z3="-2.12309433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65493799" y3="-3.36714609" z3="-1.60197189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34522375" y3="-3.85135283" z3="-0.8571832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68695658" y3="-4.85426073" z3="-1.12627972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38254592" y3="-3.54923455" z3="0.59124015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41806519" y3="-3.07413816" z3="3.34977117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69009165" y3="-4.58419855" z3="1.48288259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11261548" y3="-2.27190968" z3="1.09210289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12717794" y3="-2.03662274" z3="2.46257711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69935021" y3="-4.3486783" z3="2.85649302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88051136" y3="-5.59218552" z3="1.10282453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09633802" y3="-1.43195334" z3="0.42860451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09843259" y3="-1.02874147" z3="2.82144115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90505986" y3="-5.17318822" z3="3.54431956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4187486" y3="-2.89307132" z3="4.42858183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34472349" y3="-1.73804586" z3="-3.90244095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47294478" y3="-1.33188158" z3="-2.99951853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33689697" y3="3.7144168" z3="-1.03738015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13116614" y3="-2.9867761" z3="-1.71196097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91944399" y3="-3.16256627" z3="-0.57058003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11244942" y3="-2.28661086" z3="0.36047423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83781138" y3="-0.71990292" z3="0.61563283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69746415" y3="-0.24737682" z3="-0.97129867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.528771" y3="0.45154094" z3="1.20927678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08313866" y3="-1.05943004" z3="1.97057308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4040539" y3="-4.37328757" z3="-0.33461282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12253773" y3="-4.6106143" z3="0.86652196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99777832" y3="0.05752284" z3="-1.7650762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36547734" y3="0.61246079" z3="-0.78221248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31562972" y3="-1.07861948" z3="-1.35603648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63966956" y3="0.55612426" z3="0.56087062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16654733" y3="0.14107442" z3="2.20487597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99612298" y3="1.44827332" z3="1.31369078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54426601" y3="-0.11150194" z3="2.30227693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89573231" y3="-1.72583282" z3="1.63159411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59553635" y3="-1.522267" z3="2.84686979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05837433" y3="-4.028474" z3="0.88116147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51226135" y3="-4.35476201" z3="1.74649623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35333579" y3="-5.68429294" z3="0.86220861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27853618" y3="-2.19679223" z3="-0.17278592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13651628" y3="-3.29613182" z3="-1.03188952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49376766" y3="-4.45492865" z3="-0.61319542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99746767" y3="-4.50927197" z3="0.68373772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14550398" y3="-3.44907554" z3="1.5731079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77950259" y3="-2.29291665" z3="1.13602652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49247699" y3="-3.22635751" z3="-2.06302687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35296338" y3="-5.29683254" z3="-1.29161593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26044128" y3="-5.69745157" z3="1.11595842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73930071" y3="-3.52894158" z3="2.58249067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87279821" y3="-1.44407221" z3="1.81483233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48957415" y3="4.01983303" z3="0.05233464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86077762" y3="3.80887033" z3="-0.00776151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40306465" y3="3.29152908" z3="-1.17905043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61584804" y3="3.0093535" z3="-2.29267039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24502233" y3="3.21846265" z3="-2.21312225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04115978" y3="4.38178112" z3="0.98071523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50676591" y3="4.01762408" z3="0.84560643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83916078" y3="3.00655786" z3="-1.23264773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07861" y3="2.61707719" z3="-3.19900414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38596106" y3="2.97343091" z3="-3.0690189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16649976" y3="-5.90740059" z3="2.30429509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76721357" y3="-6.40109251" z3="0.25339059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3259832" y3="2.73671534" z3="-2.30940169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46326157" y3="3.0384234" z3="-0.18853856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61803128" y3="0.16220157" z3="-2.03191294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94316499" y3="1.40955599" z3="-1.89196812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79543348" y3="0.08977806" z3="-2.82658632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27084971" y3="1.19649988" z3="-3.48511706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31013465" y3="-0.87200767" z3="-2.91423597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17391915" y3="1.12852486" z3="-4.09803495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44386706" y3="2.52956992" z3="-2.61327143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57588398" y3="2.42586989" z3="-3.38548577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91296025" y3="3.48196728" z3="-2.55600139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93929407" y3="3.29989604" z3="-3.9333311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5801911" y3="3.90608546" z3="-0.25512046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76281784" y3="5.0578162" z3="-0.05990751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93119132" y3="3.95936532" z3="0.18993494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4509144" y3="5.10508422" z3="0.74286088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55997804" y3="3.07211238" z3="0.09478433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49178113" y3="5.11996924" z3="1.07819756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33321319" y3="6.23331173" z3="0.50219443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64991678" y3="6.26302808" z3="0.88927347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69648942" y3="7.11382583" z3="0.63226871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0772286" y3="7.17086444" z3="1.32409761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34737583" y3="-3.93485943" z3="-2.87481746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5309534" y3="-4.97012677" z3="-2.54899281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21836629" y3="-3.61064849" z3="-3.47521649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47095424" y3="-3.93009778" z3="-3.54217751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69251448" y3="-1.59924787" z3="-2.09534186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42826332" y3="-1.12497735" z3="-2.76986379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52857463" y3="-0.93720585" z3="-1.23056764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74260878" y3="-1.64300872" z3="-2.65183755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9157,-.9552,-.6842;6.5962,-1.952,-1.5553;6.0793,-.9974,-1.417;4.7719,1.4767,-1.0687;4.2856,.311,-.502;2.653,2.7385,-1.1508;4.0036,2.7354,-.8496;2.3805,4.9961,-.3749;1.8077,3.8542,-.8833;1.7556,5.8724,-.1765;2.0848,1.6129,-1.6729;3.1281,.3594,.2199;1.7113,.3853,-.6327;.6099,.7346,.299;1.6584,-.8554,-1.4962;1.0947,-2.4737,-1.3175;2.0443,-5.4912,-6.2649;1.7729,-5.0566,-5.2986;1.0618,-3.9156,-2.8451;1.7386,-3.6761,-5.1517;1.4801,-5.8831,-4.2109;1.1391,-5.3065,-2.9939;1.3921,-3.0738,-3.9317;1.9739,-3.0088,-5.9846;1.5311,-6.9709,-4.3042;.9487,-5.9396,-2.1231;.6549,-3.3671,-1.602;-.3452,-3.8514,-.8572;-.687,-4.8543,-1.1263;-.3825,-3.5492,.5912;-.4181,-3.0741,3.3498;-.6901,-4.5842,1.4829;-.1126,-2.2719,1.0921;-.1272,-2.0366,2.4626;-.6994,-4.3487,2.8565;-.8805,-5.5922,1.1028;.0963,-1.432,.4286;.0984,-1.0287,2.8214;-.9051,-5.1732,3.5443;-.4187,-2.8931,4.4286;1.3447,-1.738,-3.9024;1.4729,-1.3319,-2.9995;.3369,3.7144,-1.0374;-2.1312,-2.9868,-1.712;-2.9194,-3.1626,-.5706;-3.1124,-2.2866,.3605;-3.8378,-.7199,.6156;-4.6975,-.2474,-.9713;-2.5288,.4515,1.2093;-5.0831,-1.0594,1.9706;-3.4041,-4.3733,-.3346;-4.1225,-4.6106,.8665;-3.9978,.0575,-1.7651;-5.3655,.6125,-.7822;-5.3156,-1.0786,-1.356;-1.6397,.5561,.5609;-2.1665,.1411,2.2049;-2.9961,1.4483,1.3137;-5.5443,-.1115,2.3023;-5.8957,-1.7258,1.6316;-4.5955,-1.5223,2.8469;-5.0584,-4.0285,.8812;-3.5123,-4.3548,1.7465;-4.3533,-5.6843,.8622;4.2785,-2.1968,-.1728;4.1365,-3.2961,-1.0319;3.4938,-4.4549,-.6132;2.9975,-4.5093,.6837;3.1455,-3.4491,1.5731;3.7795,-2.2929,1.136;4.4925,-3.2264,-2.063;3.353,-5.2968,-1.2916;2.2604,-5.6975,1.116;2.7393,-3.5289,2.5825;3.8728,-1.4441,1.8148;-.4896,4.0198,.0523;-1.8608,3.8089,-.0078;-2.4031,3.2915,-1.1791;-1.6158,3.0094,-2.2927;-.245,3.2185,-2.2131;-.0412,4.3818,.9807;-2.5068,4.0176,.8456;-3.8392,3.0066,-1.2326;-2.0786,2.6171,-3.199;.386,2.9734,-3.069;2.1665,-5.9074,2.3043;1.7672,-6.4011,.2534;-4.326,2.7367,-2.3094;-4.4633,3.0384,-.1885;6.618,.1622,-2.0319;5.9432,1.4096,-1.892;7.7954,.0898,-2.8266;8.2708,1.1965,-3.4851;8.3101,-.872,-2.9142;9.1739,1.1285,-4.098;6.4439,2.5296,-2.6133;7.5759,2.4259,-3.3855;5.913,3.482,-2.556;7.9393,3.2999,-3.9333;4.5802,3.9061,-.2551;3.7628,5.0578,-.0599;5.9312,3.9594,.1899;6.4509,5.1051,.7429;6.56,3.0721,.0948;7.4918,5.12,1.0782;4.3332,6.2333,.5022;5.6499,6.263,.8893;3.6965,7.1138,.6323;6.0772,7.1709,1.3241;-2.3474,-3.9349,-2.8748;-2.531,-4.9701,-2.549;-3.2184,-3.6106,-3.4752;-1.471,-3.9301,-3.5422;-1.6925,-1.5992,-2.0953;-2.4283,-1.125,-2.7699;-1.5286,-.9372,-1.2306;-.7426,-1.643,-2.6518;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931713008</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000222747666 0.000039188463 0.007284187036 0.002059387564</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002020223189 0.001346815459</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057124137 0.000030426 0.000075983 0.000184060 0.000268573 0.000395076 0.000463288 0.000554863 0.000690583 0.000759678 0.000964237 0.001040356 0.001191513 0.001312128 0.001418374 0.001592478 0.001625357 0.001769669 0.001962228 0.002138103 0.002347720 0.002573353 0.002821025 0.003042816 0.003419825 0.003666829 0.003941381 0.004506216 0.004803899 0.004962997 0.005182791 0.005353127 0.006035231 0.006436792 0.006467574 0.006896591 0.007063895 0.007395482 0.008188998 0.008725553 0.008832138 0.009496403 0.009765102 0.009881199 0.010962350 0.011181329 0.011893926 0.012630339 0.013387407 0.013737603 0.014008985 0.014625323 0.014908206 0.015424661 0.015903089 0.016295577 0.016665671 0.018629950 0.019254197 0.019415099 0.020204162 0.020533078 0.021553060 0.021768140 0.022448332 0.022807310 0.023493753 0.023814085 0.024528313 0.025904303 0.026624033 0.026949555 0.027163477 0.027516876 0.028352278 0.029002156 0.030612865 0.030976054 0.031582460 0.034186113 0.034769896 0.036030434 0.039061218 0.039535911 0.041994082 0.045423506 0.046134863 0.046752387 0.048859336 0.049698765 0.050054777 0.050842199 0.051547373 0.052194030 0.052289298 0.052414677 0.053010167 0.053634883 0.055002530 0.056112923 0.056444716 0.056730109 0.057016551 0.057185027 0.057795245 0.058629992 0.059265408 0.059768366 0.061359680 0.062150456 0.062937169 0.064323789 0.064584984 0.065108170 0.066047263 0.067575804 0.067890393 0.069013287 0.070531851 0.071973492 0.072390510 0.072844626 0.072984282 0.073543045 0.078709691 0.080710487 0.081956376 0.083182759 0.083879932 0.084667692 0.088970403 0.089430390 0.089831276 0.091329001 0.093336269 0.094582109 0.095500332 0.096293528 0.096867005 0.098552365 0.100181415 0.100704959 0.102773853 0.103985039 0.104613933 0.106832492 0.109230356 0.111053314 0.112313625 0.112874466 0.113976519 0.114816138 0.117016018 0.117411508 0.118642904 0.119228147 0.120680926 0.122264744 0.125108502 0.125875416 0.128569520 0.129042854 0.131063824 0.133858820 0.136578251 0.137804676 0.138614626 0.139662039 0.140472181 0.143445163 0.144608871 0.145913957 0.146812515 0.152003054 0.153604754 0.154155988 0.160127724 0.160872671 0.168574750 0.171463918 0.176142095 0.179115456 0.181638704 0.184526180 0.189138919 0.190318973 0.191987673 0.201363676 0.202240040 0.206304335 0.206967356 0.207269098 0.212437776 0.212594873 0.215633458 0.217012323 0.220447866 0.220960156 0.224618452 0.225146906 0.227157381 0.231897771 0.234604159 0.236082562 0.238583936 0.246362979 0.248683337 0.252621627 0.256564376 0.257230698 0.258330394 0.262579578 0.271582425 0.282929829 0.292038040 0.300124324 0.300207332 0.301094441 0.307148716 0.307796834 0.309854645 0.320022181 0.321370627 0.326465238 0.330926096 0.336682568 0.347772625 0.352033203 0.355653818 0.360888471 0.362107265 0.364156484 0.384575553 0.407240229 0.414483145 0.430285227 0.431905957 0.435397512 0.451134184 0.464755096 0.475683869 0.478874267 0.480482162 0.486554705 0.498905569 0.503917570 0.515220430 0.518060264 0.543844195 0.566942070 0.567736864 0.586769672 0.591942253 0.605886713 0.644308740 0.645546306 0.668090401 0.675639483 0.687422949 0.704113067 0.704319588 0.704613682 0.711053761 0.717276533 0.734297660 0.738034127 0.739775271 0.747277439 0.750851878 0.771616784 0.775990072 0.809162940 0.821855582 0.824157494 0.828943977 0.834305090 0.848183478 0.849550922 0.851415261 0.854647419 0.863494354 0.867474537 0.875941867 0.887574345 0.891283339 0.892401546 0.893683469 0.902134572 0.910342811 0.918014294 0.922952512 0.924576275 0.932021339 0.935915294 0.956135767 0.962889635 0.965343301 0.970100032 0.977645542 0.982593101 0.998663033 1.012998520 1.016307108 1.021931013 1.040228939 1.055127114 1.071302791 1.073117724 1.079752775 1.087416360 1.108544018 1.110439407 1.118301133 1.119244303 1.122636212 1.123985844 1.141898935 1.149821165 1.161768678 1.170198434 1.177303534 1.188635743 1.200777363 1.222130456 1.234209113 1.258234934 1.296504564 1.298487800 1.314749701 1.326483658 1.327542948 1.330257210 1.331442045 1.334813147 1.342463541 1.349212902 1.368813948 1.380014315 1.381341803 1.381887787 1.429610141 1.514641450 1.557993869 1.684837664 1.922938234</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">280</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91609272" y3="-0.95529254" z3="-0.68394882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59780411" y3="-1.95159866" z3="-1.55323683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08059028" y3="-0.99714993" z3="-1.41523628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77240334" y3="1.47667865" z3="-1.06788731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28565766" y3="0.31075651" z3="-0.50202064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65330632" y3="2.73811642" z3="-1.15187761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00355986" y3="2.73520703" z3="-0.8493491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37969509" y3="4.99563082" z3="-0.37637146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80752337" y3="3.85362948" z3="-0.88524304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75452146" y3="5.87192366" z3="-0.17868191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08579476" y3="1.61247586" z3="-1.67467509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12741174" y3="0.35870158" z3="0.21876846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71127581" y3="0.38481046" z3="-0.63495919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60926147" y3="0.73437366" z3="0.2959556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65889329" y3="-0.85579731" z3="-1.49859683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09417409" y3="-2.47383751" z3="-1.31930926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03915024" y3="-5.49207415" z3="-6.26706245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76858552" y3="-5.05732765" z3="-5.30058134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05979482" y3="-3.91596873" z3="-2.8465694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7347203" y3="-3.67684548" z3="-5.15383906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47648658" y3="-5.88369483" z3="-4.21261331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13660735" y3="-5.30691342" z3="-2.99535229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38930019" y3="-3.07439699" z3="-3.93355903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96949812" y3="-3.00973999" z3="-5.98691419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5271603" y3="-6.97142357" z3="-4.30582071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94677863" y3="-5.93987537" z3="-2.12435066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65409726" y3="-3.36744741" z3="-1.60307082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34568322" y3="-3.85102801" z3="-0.85756771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68782902" y3="-4.85393937" z3="-1.12612849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38179364" y3="-3.54846402" z3="0.5908166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41462765" y3="-3.07231784" z3="3.34922319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68799407" y3="-4.58324113" z3="1.48323106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11171478" y3="-2.27098022" z3="1.09091184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12489323" y3="-2.03517609" z3="2.46131429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69580199" y3="-4.34729664" z3="2.85681198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87843717" y3="-5.59146864" z3="1.10381924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09618112" y3="-1.43122651" z3="0.42682283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10071263" y3="-1.02705119" z3="2.81949302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90062028" y3="-5.1715559" z3="3.54511769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41412926" y3="-2.89092235" z3="4.42800145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34213484" y3="-1.73859949" z3="-3.90441982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47159029" y3="-1.3323632" z3="-3.00171025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33682176" y3="3.71371091" z3="-1.04019172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13218887" y3="-2.98636851" z3="-1.71104411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91949791" y3="-3.16194973" z3="-0.56892018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11163357" y3="-2.28595336" z3="0.36222299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83727121" y3="-0.71936052" z3="0.61743354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6992189" y3="-0.24828547" z3="-0.96868313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52810457" y3="0.45310518" z3="1.20876499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08057523" y3="-1.05846812" z3="1.97425696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40393977" y3="-4.37251322" z3="-0.33241634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12092798" y3="-4.61015817" z3="0.86956781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00073642" y3="0.05425754" z3="-1.7644222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36552884" y3="0.61285642" z3="-0.77951224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31945346" y3="-1.07928093" z3="-1.35059975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6389898" y3="0.5564561" z3="0.5601114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16581143" y3="0.14439733" z3="2.20487284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99536697" y3="1.45002416" z3="1.3115616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54155715" y3="-0.11049423" z3="2.30610717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89343136" y3="-1.7253158" z3="1.63674418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59156665" y3="-1.52066865" z3="2.85010529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0572905" y3="-4.02854548" z3="0.88513062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50969486" y3="-4.35410141" z3="1.74878548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35134439" y3="-5.68386961" z3="0.86551884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27850688" y3="-2.19715041" z3="-0.17369097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13654798" y3="-3.29581587" z3="-1.0336814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4937584" y3="-4.45494285" z3="-0.61593707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99752148" y3="-4.51031783" z3="0.68098372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14533593" y3="-3.45072348" z3="1.57113622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77921412" y3="-2.2941546" z3="1.13493746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49267969" y3="-3.22521352" z3="-2.06470156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35294276" y3="-5.29633507" z3="-1.29501764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26069555" y3="-5.69888328" z3="1.11238275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73903597" y3="-3.53137249" z3="2.5804188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87226601" y3="-1.4456687" z3="1.81429924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49029377" y3="4.02066446" z3="0.04863713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8614347" y3="3.80948371" z3="-0.01183417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40307504" y3="3.29039957" z3="-1.18271397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61524865" y3="3.00674451" z3="-2.29553246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24444852" y3="3.21604778" z3="-2.2154965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04241494" y3="4.38395057" z3="0.97678866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5079" y3="4.0194413" z3="0.84085525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8390738" y3="3.00503736" z3="-1.23651405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07747968" y3="2.61307402" z3="-3.2015512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38693965" y3="2.96992836" z3="-3.07082892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16700434" y3="-5.90976518" z3="2.30057064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76736601" y3="-6.40190179" z3="0.24936904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3254226" y3="2.73369798" z3="-2.31309199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46358239" y3="3.03812241" z3="-0.19270054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62003391" y3="0.16277223" z3="-2.02898198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94471789" y3="1.40993921" z3="-1.88963193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79866911" y3="0.09084223" z3="-2.82184982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27490257" y3="1.19786434" z3="-3.47927611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31371269" y3="-0.87079447" z3="-2.90895791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1789713" y3="1.13028922" z3="-4.09075076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44626372" y3="2.53024012" z3="-2.60990285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57949877" y3="2.42702483" z3="-3.38038431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91508708" y3="3.48250847" z3="-2.55318329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94357011" y3="3.30129266" z3="-3.92739924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57938525" y3="3.90590495" z3="-0.25413951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76168038" y3="5.0575407" z3="-0.05985832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92987366" y3="3.95929703" z3="0.19248345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44882591" y3="5.1050352" z3="0.74609076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55889014" y3="3.07210972" z3="0.09792755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48932458" y3="5.11998509" z3="1.08262587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.331282" y3="6.23307743" z3="0.50297565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64751687" y3="6.2628993" z3="0.89163888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69430015" y3="7.11352217" z3="0.63236275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0742103" y3="7.17075551" z3="1.32703525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34934801" y3="-3.93464949" z3="-2.87352432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53268871" y3="-4.96985915" z3="-2.54742605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22085986" y3="-3.61056359" z3="-3.47332898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47339938" y3="-3.92997491" z3="-3.5414744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69376209" y3="-1.59897694" z3="-2.09502099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42958504" y3="-1.12515185" z3="-2.76977119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52992834" y3="-0.9365592" z3="-1.2305764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74385355" y3="-1.64281571" z3="-2.65155592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9161,-.9553,-.6839;6.5978,-1.9516,-1.5532;6.0806,-.9971,-1.4152;4.7724,1.4767,-1.0679;4.2857,.3108,-.502;2.6533,2.7381,-1.1519;4.0036,2.7352,-.8493;2.3797,4.9956,-.3764;1.8075,3.8536,-.8852;1.7545,5.8719,-.1787;2.0858,1.6125,-1.6747;3.1274,.3587,.2188;1.7113,.3848,-.635;.6093,.7344,.296;1.6589,-.8558,-1.4986;1.0942,-2.4738,-1.3193;2.0392,-5.4921,-6.2671;1.7686,-5.0573,-5.3006;1.0598,-3.916,-2.8466;1.7347,-3.6768,-5.1538;1.4765,-5.8837,-4.2126;1.1366,-5.3069,-2.9954;1.3893,-3.0744,-3.9336;1.9695,-3.0097,-5.9869;1.5272,-6.9714,-4.3058;.9468,-5.9399,-2.1244;.6541,-3.3674,-1.6031;-.3457,-3.851,-.8576;-.6878,-4.8539,-1.1261;-.3818,-3.5485,.5908;-.4146,-3.0723,3.3492;-.688,-4.5832,1.4832;-.1117,-2.271,1.0909;-.1249,-2.0352,2.4613;-.6958,-4.3473,2.8568;-.8784,-5.5915,1.1038;.0962,-1.4312,.4268;.1007,-1.0271,2.8195;-.9006,-5.1716,3.5451;-.4141,-2.8909,4.428;1.3421,-1.7386,-3.9044;1.4716,-1.3324,-3.0017;.3368,3.7137,-1.0402;-2.1322,-2.9864,-1.711;-2.9195,-3.1619,-.5689;-3.1116,-2.286,.3622;-3.8373,-.7194,.6174;-4.6992,-.2483,-.9687;-2.5281,.4531,1.2088;-5.0806,-1.0585,1.9743;-3.4039,-4.3725,-.3324;-4.1209,-4.6102,.8696;-4.0007,.0543,-1.7644;-5.3655,.6129,-.7795;-5.3195,-1.0793,-1.3506;-1.639,.5565,.5601;-2.1658,.1444,2.2049;-2.9954,1.45,1.3116;-5.5416,-.1105,2.3061;-5.8934,-1.7253,1.6367;-4.5916,-1.5207,2.8501;-5.0573,-4.0285,.8851;-3.5097,-4.3541,1.7488;-4.3513,-5.6839,.8655;4.2785,-2.1972,-.1737;4.1365,-3.2958,-1.0337;3.4938,-4.4549,-.6159;2.9975,-4.5103,.681;3.1453,-3.4507,1.5711;3.7792,-2.2942,1.1349;4.4927,-3.2252,-2.0647;3.3529,-5.2963,-1.295;2.2607,-5.6989,1.1124;2.739,-3.5314,2.5804;3.8723,-1.4457,1.8143;-.4903,4.0207,.0486;-1.8614,3.8095,-.0118;-2.4031,3.2904,-1.1827;-1.6152,3.0067,-2.2955;-.2444,3.216,-2.2155;-.0424,4.384,.9768;-2.5079,4.0194,.8409;-3.8391,3.005,-1.2365;-2.0775,2.6131,-3.2016;.3869,2.9699,-3.0708;2.167,-5.9098,2.3006;1.7674,-6.4019,.2494;-4.3254,2.7337,-2.3131;-4.4636,3.0381,-.1927;6.62,.1628,-2.029;5.9447,1.4099,-1.8896;7.7987,.0908,-2.8218;8.2749,1.1979,-3.4793;8.3137,-.8708,-2.909;9.179,1.1303,-4.0908;6.4463,2.5302,-2.6099;7.5795,2.427,-3.3804;5.9151,3.4825,-2.5532;7.9436,3.3013,-3.9274;4.5794,3.9059,-.2541;3.7617,5.0575,-.0599;5.9299,3.9593,.1925;6.4488,5.105,.7461;6.5589,3.0721,.0979;7.4893,5.12,1.0826;4.3313,6.2331,.503;5.6475,6.2629,.8916;3.6943,7.1135,.6324;6.0742,7.1708,1.327;-2.3493,-3.9346,-2.8735;-2.5327,-4.9699,-2.5474;-3.2209,-3.6106,-3.4733;-1.4734,-3.93,-3.5415;-1.6938,-1.599,-2.095;-2.4296,-1.1252,-2.7698;-1.5299,-.9366,-1.2306;-.7439,-1.6428,-2.6516;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932095920</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000090125202 0.000017388188 0.010777680554 0.003050437249</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.004993054023 0.003328702682</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057124533 0.000009122 0.000030666 0.000200922 0.000269620 0.000395608 0.000482191 0.000565147 0.000691606 0.000753231 0.000957114 0.001039325 0.001193547 0.001308781 0.001415087 0.001586964 0.001616784 0.001771585 0.001956787 0.002134519 0.002336848 0.002572940 0.002820081 0.003042176 0.003420650 0.003667438 0.003938718 0.004505958 0.004804008 0.004962149 0.005183528 0.005353500 0.006036878 0.006436062 0.006467451 0.006899653 0.007064315 0.007394184 0.008190011 0.008726935 0.008831154 0.009496285 0.009764632 0.009881537 0.010962069 0.011181003 0.011894080 0.012632336 0.013388182 0.013733367 0.014012001 0.014626364 0.014906952 0.015425055 0.015903373 0.016288044 0.016666274 0.018631365 0.019251776 0.019415049 0.020204047 0.020533093 0.021552774 0.021768299 0.022448028 0.022808094 0.023493864 0.023814975 0.024528924 0.025904328 0.026624105 0.026949581 0.027163824 0.027516179 0.028352386 0.029004385 0.030583934 0.030976964 0.031582654 0.034187257 0.034770897 0.036030747 0.039061528 0.039536073 0.041995201 0.045423727 0.046137438 0.046751713 0.048859206 0.049698745 0.050057144 0.050842204 0.051547536 0.052194523 0.052289302 0.052414695 0.053010275 0.053635461 0.055002310 0.056112918 0.056444729 0.056730226 0.057016591 0.057184506 0.057795411 0.058630010 0.059265849 0.059768745 0.061359408 0.062150830 0.062937143 0.064323941 0.064585245 0.065108130 0.066047722 0.067576169 0.067890834 0.069014267 0.070534826 0.071968847 0.072384959 0.072840136 0.072984804 0.073522317 0.078708699 0.080706999 0.081963537 0.083172410 0.083863138 0.084662270 0.088970342 0.089430912 0.089831288 0.091330370 0.093336573 0.094582198 0.095500466 0.096294168 0.096867175 0.098555943 0.100184943 0.100704852 0.102776076 0.103986810 0.104621132 0.106834415 0.109232922 0.111054685 0.112313737 0.112874774 0.113981491 0.114816113 0.117016830 0.117414655 0.118644838 0.119227952 0.120682048 0.122263702 0.125108610 0.125875064 0.128571988 0.129045617 0.131065422 0.133859322 0.136583481 0.137806740 0.138615424 0.139662952 0.140470598 0.143444051 0.144607844 0.145913869 0.146812775 0.152003789 0.153605038 0.154154373 0.160114375 0.160872375 0.168575342 0.171463986 0.176151321 0.179115831 0.181639519 0.184527618 0.189139226 0.190324851 0.191987308 0.201363883 0.202240439 0.206304741 0.206967464 0.207269131 0.212439405 0.212595450 0.215633748 0.217013952 0.220449415 0.220959680 0.224620610 0.225147100 0.227158541 0.231898617 0.234604600 0.236094013 0.238584480 0.246361418 0.248677903 0.252631945 0.256564514 0.257230835 0.258330698 0.262579664 0.271582545 0.282929987 0.292038245 0.300125907 0.300211531 0.301095942 0.307149212 0.307796999 0.309854788 0.320022010 0.321371111 0.326465221 0.330935863 0.336683349 0.347772832 0.352033143 0.355653770 0.360887408 0.362107515 0.364156566 0.384575767 0.407240890 0.414483045 0.430286406 0.431902374 0.435398636 0.451135173 0.464755761 0.475685416 0.478875037 0.480484289 0.486553878 0.498905742 0.503916411 0.515220845 0.518060105 0.543845131 0.566942445 0.567736898 0.586770781 0.591939933 0.605886948 0.644313638 0.645546806 0.668090509 0.675638701 0.687423046 0.704113696 0.704317824 0.704605489 0.711057875 0.717276712 0.734298403 0.738034118 0.739775002 0.747275779 0.750852549 0.771616803 0.775990173 0.809163056 0.821855787 0.824158114 0.828944076 0.834305122 0.848194801 0.849551767 0.851415569 0.854648740 0.863497338 0.867474570 0.875942242 0.887576339 0.891303831 0.892402051 0.893688537 0.902134606 0.910344228 0.918012670 0.922945750 0.924576148 0.932021481 0.935925318 0.956135594 0.962891916 0.965344534 0.970101609 0.977643239 0.982592907 0.998663404 1.012999833 1.016307283 1.021931330 1.040229745 1.055127358 1.071303091 1.073118152 1.079755543 1.087416940 1.108544093 1.110439480 1.118303673 1.119245419 1.122636281 1.123986124 1.141899027 1.149834647 1.161768720 1.170198473 1.177304222 1.188651213 1.200777633 1.222132284 1.234210137 1.258235148 1.296505230 1.298500852 1.314749938 1.326483776 1.327544375 1.330257352 1.331443086 1.334814474 1.342464309 1.349213864 1.368827171 1.380014760 1.381342059 1.381888358 1.429610799 1.514613970 1.557993875 1.684837739 1.922938818</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">281</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91564968" y3="-0.95547051" z3="-0.68446801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59855758" y3="-1.95138855" z3="-1.55192172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08122058" y3="-0.99697244" z3="-1.41408195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77270403" y3="1.47675257" z3="-1.06691468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28494352" y3="0.31044834" z3="-0.50268668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.653918" y3="2.73839075" z3="-1.15339642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00366172" y3="2.73520003" z3="-0.84867163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37912609" y3="4.995216" z3="-0.37617544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80764374" y3="3.85362298" z3="-0.88682213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.753658" y3="5.87134284" z3="-0.17847129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08737684" y3="1.61310839" z3="-1.67810805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12553067" y3="0.35783967" z3="0.21626582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71074287" y3="0.38501881" z3="-0.63966904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60754207" y3="0.73493004" z3="0.28972336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65905247" y3="-0.8552506" z3="-1.50380451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09371713" y3="-2.47331945" z3="-1.3223056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02837256" y3="-5.49390094" z3="-6.27082139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76018518" y3="-5.05867184" z3="-5.30390317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05696974" y3="-3.91611297" z3="-2.84892862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72628776" y3="-3.67807896" z3="-5.15791306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4711624" y3="-5.8845273" z3="-4.21470411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13403029" y3="-5.30714871" z3="-2.9969687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38375944" y3="-3.07505223" z3="-3.93712901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95874435" y3="-3.01137825" z3="-5.99197657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52197723" y3="-6.97231011" z3="-4.30739502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9463695" y3="-5.93967325" z3="-2.12516241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65314022" y3="-3.36687272" z3="-1.60512909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34525475" y3="-3.85064627" z3="-0.85771096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68733634" y3="-4.85390863" z3="-1.12500527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37950549" y3="-3.54676787" z3="0.59040815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40796614" y3="-3.06769491" z3="3.34830765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68275959" y3="-4.58096776" z3="1.48438408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11053374" y3="-2.26826229" z3="1.08864403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12152601" y3="-2.03094006" z3="2.4587754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68843968" y3="-4.3434568" z3="2.85770201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87256211" y3="-5.58983741" z3="1.1063711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09479781" y3="-1.42890138" z3="0.42328787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10331413" y3="-1.02211051" z3="2.81543502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89075283" y3="-5.16732748" z3="3.54730382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40583673" y3="-2.88507315" z3="4.42685805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33637024" y3="-1.7392459" z3="-3.90851421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46780475" y3="-1.33262539" z3="-3.0062805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33711587" y3="3.71363936" z3="-1.04313899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13362939" y3="-2.98774029" z3="-1.70986317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91908275" y3="-3.16245385" z3="-0.5663782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11080325" y3="-2.28524609" z3="0.36376411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83693538" y3="-0.71869204" z3="0.61775435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70050663" y3="-0.24926338" z3="-0.9679389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52766757" y3="0.45469902" z3="1.20712458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07922269" y3="-1.05711534" z3="1.97581695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40197101" y3="-4.37329033" z3="-0.32733853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11681926" y3="-4.60956128" z3="0.87619136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00301269" y3="0.05115775" z3="-1.76535419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36540983" y3="0.61303675" z3="-0.77891813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32247355" y3="-1.08008955" z3="-1.34745768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63840917" y3="0.55678413" z3="0.55850218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16572932" y3="0.14779211" z3="2.20392753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99480607" y3="1.45191454" z3="1.30791372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53976263" y3="-0.10902638" z3="2.3079301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89244153" y3="-1.72397036" z3="1.63930358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58933457" y3="-1.51912938" z3="2.85129316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05288937" y3="-4.0278842" z3="0.89294574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50406337" y3="-4.35234652" z3="1.75407273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34706153" y3="-5.68335508" z3="0.87383121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27765526" y3="-2.19753379" z3="-0.17520753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.135533" y3="-3.29564766" z3="-1.03582593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4931558" y3="-4.45516505" z3="-0.61848573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99769783" y3="-4.51149931" z3="0.6787092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14539296" y3="-3.45232735" z3="1.56933383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77864289" y3="-2.29529286" z3="1.13345474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4914006" y3="-3.22432496" z3="-2.0668898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35222454" y3="-5.29620021" z3="-1.29797718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26207598" y3="-5.70088236" z3="1.11002918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73956118" y3="-3.53370353" z3="2.57875432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87170076" y3="-1.44714973" z3="1.81318283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49089211" y3="4.02095416" z3="0.04492937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86191627" y3="3.80951628" z3="-0.01647682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40254025" y3="3.28950521" z3="-1.18736642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61386088" y3="3.00556587" z3="-2.29948791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24323128" y3="3.21545341" z3="-2.21871937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04384192" y3="4.38477993" z3="0.97324266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50902684" y3="4.01978626" z3="0.83566858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83837795" y3="3.0036034" z3="-1.24194232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0753084" y3="2.61122218" z3="-3.20559585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38874336" y3="2.96917984" z3="-3.07350414">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16971833" y3="-5.91268601" z3="2.29817492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76832077" y3="-6.4036419" z3="0.24703477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32384491" y3="2.73085031" z3="-2.31855538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46367604" y3="3.03774372" z3="-0.19860109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62177121" y3="0.16337276" z3="-2.02607844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94636823" y3="1.4105242" z3="-1.88678286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8017928" y3="0.09199313" z3="-2.81696692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2793397" y3="1.19956402" z3="-3.47253394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31690682" y3="-0.8696328" z3="-2.90400741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18453013" y3="1.13243729" z3="-4.0824244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44927149" y3="2.53139744" z3="-2.60523353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58388199" y3="2.42873406" z3="-3.37379122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91808286" y3="3.48368204" z3="-2.54861975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94903323" y3="3.30345982" z3="-3.91936613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57863132" y3="3.9053482" z3="-0.25154555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76066752" y3="5.05686522" z3="-0.05762156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92838496" y3="3.95828889" z3="0.19736884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44651309" y3="5.10354217" z3="0.75275043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55747073" y3="3.07114671" z3="0.10322881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48643904" y3="5.11816173" z3="1.09105447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32944037" y3="6.23191521" z3="0.50707012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64506204" y3="6.26133925" z3="0.8978884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69229175" y3="7.11227839" z3="0.636156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07111759" y3="7.16880327" z3="1.33472145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35200378" y3="-3.93763948" z3="-2.87081642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53438262" y3="-4.97250669" z3="-2.54301294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22454331" y3="-3.61470752" z3="-3.46964631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47712256" y3="-3.93341275" z3="-3.54019604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69637915" y3="-1.60061521" z3="-2.09626334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43279488" y3="-1.12843946" z3="-2.77153684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53266321" y3="-0.93657098" z3="-1.23300871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74669194" y3="-1.6446037" z3="-2.65311506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9156,-.9555,-.6845;6.5986,-1.9514,-1.5519;6.0812,-.997,-1.4141;4.7727,1.4768,-1.0669;4.2849,.3104,-.5027;2.6539,2.7384,-1.1534;4.0037,2.7352,-.8487;2.3791,4.9952,-.3762;1.8076,3.8536,-.8868;1.7537,5.8713,-.1785;2.0874,1.6131,-1.6781;3.1255,.3578,.2163;1.7107,.385,-.6397;.6075,.7349,.2897;1.6591,-.8553,-1.5038;1.0937,-2.4733,-1.3223;2.0284,-5.4939,-6.2708;1.7602,-5.0587,-5.3039;1.057,-3.9161,-2.8489;1.7263,-3.6781,-5.1579;1.4712,-5.8845,-4.2147;1.134,-5.3071,-2.997;1.3838,-3.0751,-3.9371;1.9587,-3.0114,-5.992;1.522,-6.9723,-4.3074;.9464,-5.9397,-2.1252;.6531,-3.3669,-1.6051;-.3453,-3.8506,-.8577;-.6873,-4.8539,-1.125;-.3795,-3.5468,.5904;-.408,-3.0677,3.3483;-.6828,-4.581,1.4844;-.1105,-2.2683,1.0886;-.1215,-2.0309,2.4588;-.6884,-4.3435,2.8577;-.8726,-5.5898,1.1064;.0948,-1.4289,.4233;.1033,-1.0221,2.8154;-.8908,-5.1673,3.5473;-.4058,-2.8851,4.4269;1.3364,-1.7392,-3.9085;1.4678,-1.3326,-3.0063;.3371,3.7136,-1.0431;-2.1336,-2.9877,-1.7099;-2.9191,-3.1625,-.5664;-3.1108,-2.2852,.3638;-3.8369,-.7187,.6178;-4.7005,-.2493,-.9679;-2.5277,.4547,1.2071;-5.0792,-1.0571,1.9758;-3.402,-4.3733,-.3273;-4.1168,-4.6096,.8762;-4.003,.0512,-1.7654;-5.3654,.613,-.7789;-5.3225,-1.0801,-1.3475;-1.6384,.5568,.5585;-2.1657,.1478,2.2039;-2.9948,1.4519,1.3079;-5.5398,-.109,2.3079;-5.8924,-1.724,1.6393;-4.5893,-1.5191,2.8513;-5.0529,-4.0279,.8929;-3.5041,-4.3523,1.7541;-4.3471,-5.6834,.8738;4.2777,-2.1975,-.1752;4.1355,-3.2956,-1.0358;3.4932,-4.4552,-.6185;2.9977,-4.5115,.6787;3.1454,-3.4523,1.5693;3.7786,-2.2953,1.1335;4.4914,-3.2243,-2.0669;3.3522,-5.2962,-1.298;2.2621,-5.7009,1.11;2.7396,-3.5337,2.5788;3.8717,-1.4471,1.8132;-.4909,4.021,.0449;-1.8619,3.8095,-.0165;-2.4025,3.2895,-1.1874;-1.6139,3.0056,-2.2995;-.2432,3.2155,-2.2187;-.0438,4.3848,.9732;-2.509,4.0198,.8357;-3.8384,3.0036,-1.2419;-2.0753,2.6112,-3.2056;.3887,2.9692,-3.0735;2.1697,-5.9127,2.2982;1.7683,-6.4036,.247;-4.3238,2.7309,-2.3186;-4.4637,3.0377,-.1986;6.6218,.1634,-2.0261;5.9464,1.4105,-1.8868;7.8018,.092,-2.817;8.2793,1.1996,-3.4725;8.3169,-.8696,-2.904;9.1845,1.1324,-4.0824;6.4493,2.5314,-2.6052;7.5839,2.4287,-3.3738;5.9181,3.4837,-2.5486;7.949,3.3035,-3.9194;4.5786,3.9053,-.2515;3.7607,5.0569,-.0576;5.9284,3.9583,.1974;6.4465,5.1035,.7528;6.5575,3.0711,.1032;7.4864,5.1182,1.0911;4.3294,6.2319,.5071;5.6451,6.2613,.8979;3.6923,7.1123,.6362;6.0711,7.1688,1.3347;-2.352,-3.9376,-2.8708;-2.5344,-4.9725,-2.543;-3.2245,-3.6147,-3.4696;-1.4771,-3.9334,-3.5402;-1.6964,-1.6006,-2.0963;-2.4328,-1.1284,-2.7715;-1.5327,-.9366,-1.233;-.7467,-1.6446,-2.6531;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931810286</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000231837887 0.000038636918 0.008205766906 0.002282130161</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001941011478 0.001294007652</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057125352 0.000017788 0.000059117 0.000193566 0.000235476 0.000399872 0.000460223 0.000555514 0.000686162 0.000750581 0.000951325 0.001040393 0.001195611 0.001309280 0.001416480 0.001584257 0.001623048 0.001771503 0.001938104 0.002120356 0.002324753 0.002575367 0.002816159 0.003043854 0.003415787 0.003667808 0.003935322 0.004505514 0.004804971 0.004954483 0.005182871 0.005353831 0.006029750 0.006436336 0.006467622 0.006899083 0.007049759 0.007388565 0.008189690 0.008726794 0.008830392 0.009494507 0.009767099 0.009881557 0.010964018 0.011182031 0.011891476 0.012634278 0.013388119 0.013723281 0.014016018 0.014626698 0.014902889 0.015424700 0.015903293 0.016266036 0.016666769 0.018631748 0.019252846 0.019415227 0.020201965 0.020532184 0.021551849 0.021767776 0.022446420 0.022807701 0.023493680 0.023816930 0.024529188 0.025904253 0.026623249 0.026948494 0.027163590 0.027514996 0.028352497 0.029006562 0.030518782 0.030977832 0.031582100 0.034187782 0.034771878 0.036030258 0.039062317 0.039536932 0.041995817 0.045423933 0.046136670 0.046750433 0.048858364 0.049698692 0.050058177 0.050842178 0.051547718 0.052194620 0.052289335 0.052414750 0.053010450 0.053635852 0.055002327 0.056112931 0.056444862 0.056730247 0.057016516 0.057181106 0.057795698 0.058629752 0.059266397 0.059768924 0.061358665 0.062150981 0.062936745 0.064325502 0.064585281 0.065108573 0.066046845 0.067576711 0.067884920 0.069014904 0.070535492 0.071947866 0.072369585 0.072822446 0.072983958 0.073464807 0.078700649 0.080688957 0.081960367 0.083143170 0.083817700 0.084649347 0.088969659 0.089431394 0.089831400 0.091331689 0.093336437 0.094582240 0.095500537 0.096294194 0.096867412 0.098557818 0.100186605 0.100704477 0.102778329 0.103987729 0.104623784 0.106837493 0.109234724 0.111056670 0.112313858 0.112875845 0.113987426 0.114815910 0.117017024 0.117417919 0.118647489 0.119224717 0.120683927 0.122261378 0.125108388 0.125873434 0.128573334 0.129047077 0.131065766 0.133860116 0.136588861 0.137807971 0.138615384 0.139662832 0.140467964 0.143444357 0.144606793 0.145911542 0.146813082 0.152005019 0.153605570 0.154151758 0.160074453 0.160872626 0.168576894 0.171464112 0.176156084 0.179115933 0.181639908 0.184529065 0.189139493 0.190332512 0.191986249 0.201364756 0.202241002 0.206304978 0.206967541 0.207269199 0.212441329 0.212595750 0.215633678 0.217007545 0.220450536 0.220957700 0.224619446 0.225147591 0.227159365 0.231899764 0.234604972 0.236102403 0.238585073 0.246357213 0.248664818 0.252640556 0.256564638 0.257230918 0.258330754 0.262578978 0.271582614 0.282929907 0.292038769 0.300126089 0.300213952 0.301097241 0.307149677 0.307797044 0.309854892 0.320014595 0.321371429 0.326465038 0.330941227 0.336684414 0.347773114 0.352032873 0.355653607 0.360877694 0.362107562 0.364156590 0.384575143 0.407241378 0.414481897 0.430287124 0.431896988 0.435398652 0.451135846 0.464755838 0.475685448 0.478875530 0.480486632 0.486550946 0.498905818 0.503916259 0.515220452 0.518058867 0.543844318 0.566942337 0.567736875 0.586771259 0.591929125 0.605886677 0.644308458 0.645546706 0.668090513 0.675636443 0.687423134 0.704110857 0.704303365 0.704559308 0.711058766 0.717276783 0.734299329 0.738033959 0.739771609 0.747273976 0.750853104 0.771616834 0.775990284 0.809163201 0.821855804 0.824158542 0.828944107 0.834305069 0.848202584 0.849552528 0.851415373 0.854650103 0.863499861 0.867474591 0.875942460 0.887578424 0.891312407 0.892396003 0.893689150 0.902133877 0.910345403 0.918012579 0.922914888 0.924575496 0.932021564 0.935930997 0.956134648 0.962892674 0.965345335 0.970102343 0.977613544 0.982590885 0.998663660 1.012999697 1.016306779 1.021931539 1.040230175 1.055127399 1.071302357 1.073118032 1.079757246 1.087417263 1.108544056 1.110439506 1.118305200 1.119245700 1.122636356 1.123986304 1.141899027 1.149845024 1.161768746 1.170198464 1.177304617 1.188661911 1.200777744 1.222133377 1.234210550 1.258235184 1.296505614 1.298511032 1.314750032 1.326483568 1.327540973 1.330256810 1.331443481 1.334815434 1.342464560 1.349213740 1.368836440 1.380015123 1.381342098 1.381889286 1.429603557 1.514480982 1.557993694 1.684837935 1.922938734</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">282</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91691358" y3="-0.9552317" z3="-0.68345187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59942395" y3="-1.95142415" z3="-1.55130613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08216904" y3="-0.99696231" z3="-1.41352132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77365788" y3="1.47683647" z3="-1.06683624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28630152" y3="0.31075729" z3="-0.50181743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65453097" y3="2.73793418" z3="-1.15343494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00437448" y3="2.73524408" z3="-0.84910771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37945689" y3="4.995333" z3="-0.37811653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80813912" y3="3.85324542" z3="-0.88780108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75387915" y3="5.87150448" z3="-0.1811708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08797008" y3="1.61216277" z3="-1.67699336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12725339" y3="0.35841903" z3="0.21770186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71205415" y3="0.38467978" z3="-0.63757647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60911032" y3="0.73463371" z3="0.29209021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.660421" y3="-0.85600228" z3="-1.5011465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09383833" y3="-2.47331915" z3="-1.3209633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03264819" y3="-5.49217171" z3="-6.26952416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76328375" y3="-5.05724416" z3="-5.30279327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05750143" y3="-3.91545756" z3="-2.84815046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72969308" y3="-3.67671813" z3="-5.1562424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4724573" y3="-5.88342338" z3="-4.2143479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13406115" y3="-5.306429" z3="-2.99677272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38578056" y3="-3.07407476" z3="-3.93565212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96350989" y3="-3.00976815" z3="-5.98971284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52294287" y3="-6.97117526" z3="-4.30744552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94513483" y3="-5.93922494" z3="-2.12545723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65303525" y3="-3.36669175" z3="-1.6043603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3463959" y3="-3.84992545" z3="-0.85808887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6889866" y3="-4.85277777" z3="-1.12630848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38127183" y3="-3.54729944" z3="0.59033292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41224999" y3="-3.07094727" z3="3.34871922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6869902" y3="-4.58197059" z3="1.48300515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11075014" y3="-2.26978048" z3="1.09016133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12300773" y3="-2.03386545" z3="2.46054913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69389527" y3="-4.34592288" z3="2.85657006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87784064" y3="-5.59013401" z3="1.10375344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09668462" y3="-1.43002114" z3="0.42592707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10302342" y3="-1.02578346" z3="2.81855314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89832256" y3="-5.17014097" z3="3.54507845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41103681" y3="-2.88946095" z3="4.42747526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33865016" y3="-1.73825536" z3="-3.9065617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46980661" y3="-1.33211109" z3="-3.00405841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33765477" y3="3.71279963" z3="-1.04423508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13309274" y3="-2.98482927" z3="-1.71007252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91972839" y3="-3.16142024" z3="-0.56763257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11145715" y3="-2.28618262" z3="0.36432519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83753" y3="-0.72005393" z3="0.62075827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.7043695" y3="-0.25126061" z3="-0.96329293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52806342" y3="0.45448235" z3="1.20747538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07611531" y3="-1.05960405" z3="1.98174358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40384071" y3="-4.37225265" z3="-0.33184141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12028322" y3="-4.61086877" z3="0.87027743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.008192" y3="0.04802028" z3="-1.76227246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36831109" y3="0.61165604" z3="-0.77390959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32749368" y3="-1.08206015" z3="-1.3408835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64053026" y3="0.55801582" z3="0.55675502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16312087" y3="0.1474372" z3="2.2031225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99611909" y3="1.45103149" z3="1.31012772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53675011" y3="-0.11195259" z3="2.31497435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88950904" y3="-1.727295" z3="1.6472802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58363402" y3="-1.52111525" z3="2.85599729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05669599" y3="-4.02944221" z3="0.88664536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50877564" y3="-4.35524714" z3="1.7494386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35042828" y3="-5.68466576" z3="0.86562545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27874294" y3="-2.19713131" z3="-0.17402768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13616282" y3="-3.29516008" z3="-1.03470592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49298797" y3="-4.45431048" z3="-0.61755623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99714091" y3="-4.51034993" z3="0.6794962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14545643" y3="-3.45133552" z3="1.57024787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77957902" y3="-2.29469144" z3="1.13458728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49219512" y3="-3.22400369" z3="-2.06572276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35168647" y3="-5.29525241" z3="-1.29712017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26032454" y3="-5.69909617" z3="1.11049272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73936615" y3="-3.53249954" z3="2.57957429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87306574" y3="-1.4466382" z3="1.81440312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49067613" y3="4.02054414" z3="0.0434624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86161754" y3="3.80848244" z3="-0.01801524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4018263" y3="3.28744849" z3="-1.18868392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61281386" y3="3.0030538" z3="-2.3004812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24226088" y3="3.21353736" z3="-2.21953493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04390486" y3="4.38511934" z3="0.97164797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50899512" y3="4.01908296" z3="0.83381179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83753402" y3="3.00078114" z3="-1.24330168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07391763" y3="2.60784851" z3="-3.20640224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3899852" y3="2.9669504" z3="-3.07407411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16702192" y3="-5.9106295" z3="2.2986022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7666236" y3="-6.40161406" z3="0.24728186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32233739" y3="2.72537304" z3="-2.31955171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46338283" y3="3.03700177" z3="-0.20039755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.622383" y3="0.16316265" z3="-2.02622429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94695689" y3="1.41032208" z3="-1.88720548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8019648" y3="0.09146821" z3="-2.81771351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27905521" y3="1.19871516" z3="-3.47414072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31707616" y3="-0.87016159" z3="-2.90455762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18387296" y3="1.13132444" z3="-4.08453717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44941628" y3="2.53086011" z3="-2.60647313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58358612" y3="2.42787541" z3="-3.37562469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9182164" y3="3.48313948" z3="-2.55005173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94836145" y3="3.30233216" z3="-3.921868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57918667" y3="3.90597967" z3="-0.25299366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76099958" y3="5.05745239" z3="-0.05971677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92903865" y3="3.95953982" z3="0.19552966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44698684" y3="5.10527412" z3="0.75011228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55834557" y3="3.07246634" z3="0.10162834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48698955" y3="5.12035895" z3="1.08816496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32960395" y3="6.23300491" z3="0.50411286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6452594" y3="6.2629764" z3="0.89471853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69228828" y3="7.11332762" z3="0.63273347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07115972" y3="7.17082904" z3="1.33091467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35096555" y3="-3.93221541" z3="-2.87315967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53359993" y3="-4.96777489" z3="-2.54779687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22314875" y3="-3.60793293" z3="-3.47186666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47563809" y3="-3.92662446" z3="-3.54190712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69501224" y3="-1.59710311" z3="-2.09333866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43111842" y3="-1.12291352" z3="-2.76755123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53092914" y3="-0.93517803" z3="-1.22858107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74531788" y3="-1.64057764" z3="-2.65028174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9169,-.9552,-.6835;6.5994,-1.9514,-1.5513;6.0822,-.997,-1.4135;4.7737,1.4768,-1.0668;4.2863,.3108,-.5018;2.6545,2.7379,-1.1534;4.0044,2.7352,-.8491;2.3795,4.9953,-.3781;1.8081,3.8532,-.8878;1.7539,5.8715,-.1812;2.088,1.6122,-1.677;3.1273,.3584,.2177;1.7121,.3847,-.6376;.6091,.7346,.2921;1.6604,-.856,-1.5011;1.0938,-2.4733,-1.321;2.0326,-5.4922,-6.2695;1.7633,-5.0572,-5.3028;1.0575,-3.9155,-2.8482;1.7297,-3.6767,-5.1562;1.4725,-5.8834,-4.2143;1.1341,-5.3064,-2.9968;1.3858,-3.0741,-3.9357;1.9635,-3.0098,-5.9897;1.5229,-6.9712,-4.3074;.9451,-5.9392,-2.1255;.653,-3.3667,-1.6044;-.3464,-3.8499,-.8581;-.689,-4.8528,-1.1263;-.3813,-3.5473,.5903;-.4122,-3.0709,3.3487;-.687,-4.582,1.483;-.1108,-2.2698,1.0902;-.123,-2.0339,2.4605;-.6939,-4.3459,2.8566;-.8778,-5.5901,1.1038;.0967,-1.43,.4259;.103,-1.0258,2.8186;-.8983,-5.1701,3.5451;-.411,-2.8895,4.4275;1.3387,-1.7383,-3.9066;1.4698,-1.3321,-3.0041;.3377,3.7128,-1.0442;-2.1331,-2.9848,-1.7101;-2.9197,-3.1614,-.5676;-3.1115,-2.2862,.3643;-3.8375,-.7201,.6208;-4.7044,-.2513,-.9633;-2.5281,.4545,1.2075;-5.0761,-1.0596,1.9817;-3.4038,-4.3723,-.3318;-4.1203,-4.6109,.8703;-4.0082,.048,-1.7623;-5.3683,.6117,-.7739;-5.3275,-1.0821,-1.3409;-1.6405,.558,.5568;-2.1631,.1474,2.2031;-2.9961,1.451,1.3101;-5.5368,-.112,2.315;-5.8895,-1.7273,1.6473;-4.5836,-1.5211,2.856;-5.0567,-4.0294,.8866;-3.5088,-4.3552,1.7494;-4.3504,-5.6847,.8656;4.2787,-2.1971,-.174;4.1362,-3.2952,-1.0347;3.493,-4.4543,-.6176;2.9971,-4.5103,.6795;3.1455,-3.4513,1.5702;3.7796,-2.2947,1.1346;4.4922,-3.224,-2.0657;3.3517,-5.2953,-1.2971;2.2603,-5.6991,1.1105;2.7394,-3.5325,2.5796;3.8731,-1.4466,1.8144;-.4907,4.0205,.0435;-1.8616,3.8085,-.018;-2.4018,3.2874,-1.1887;-1.6128,3.0031,-2.3005;-.2423,3.2135,-2.2195;-.0439,4.3851,.9716;-2.509,4.0191,.8338;-3.8375,3.0008,-1.2433;-2.0739,2.6078,-3.2064;.39,2.967,-3.0741;2.167,-5.9106,2.2986;1.7666,-6.4016,.2473;-4.3223,2.7254,-2.3196;-4.4634,3.037,-.2004;6.6224,.1632,-2.0262;5.947,1.4103,-1.8872;7.802,.0915,-2.8177;8.2791,1.1987,-3.4741;8.3171,-.8702,-2.9046;9.1839,1.1313,-4.0845;6.4494,2.5309,-2.6065;7.5836,2.4279,-3.3756;5.9182,3.4831,-2.5501;7.9484,3.3023,-3.9219;4.5792,3.906,-.253;3.761,5.0575,-.0597;5.929,3.9595,.1955;6.447,5.1053,.7501;6.5583,3.0725,.1016;7.487,5.1204,1.0882;4.3296,6.233,.5041;5.6453,6.263,.8947;3.6923,7.1133,.6327;6.0712,7.1708,1.3309;-2.351,-3.9322,-2.8732;-2.5336,-4.9678,-2.5478;-3.2231,-3.6079,-3.4719;-1.4756,-3.9266,-3.5419;-1.695,-1.5971,-2.0933;-2.4311,-1.1229,-2.7676;-1.5309,-.9352,-1.2286;-.7453,-1.6406,-2.6503;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932254405</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000100043932 0.000015967857 0.011453570124 0.003290656541</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.004498023919 0.002998682613</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122833 0.000012981 0.000060836 0.000124293 0.000234771 0.000401633 0.000465789 0.000558482 0.000705120 0.000749669 0.000931242 0.001034911 0.001197867 0.001275655 0.001409318 0.001577664 0.001589762 0.001770337 0.001851479 0.002098335 0.002305006 0.002568807 0.002803455 0.003039771 0.003407803 0.003667627 0.003938230 0.004503708 0.004805014 0.004956508 0.005181246 0.005357895 0.006018879 0.006435972 0.006467154 0.006898149 0.007016788 0.007380806 0.008189829 0.008725593 0.008829530 0.009485715 0.009767095 0.009881069 0.010965034 0.011181619 0.011886638 0.012634753 0.013388375 0.013695448 0.014000294 0.014626743 0.014891950 0.015420575 0.015905261 0.016200190 0.016666764 0.018632058 0.019253239 0.019416440 0.020198485 0.020531218 0.021553570 0.021765840 0.022438449 0.022808638 0.023493665 0.023810446 0.024528984 0.025904127 0.026625500 0.026938445 0.027163368 0.027505841 0.028352815 0.028945175 0.030301901 0.030980340 0.031580757 0.034194937 0.034773558 0.036030044 0.039062260 0.039533493 0.041996077 0.045423891 0.046138583 0.046748758 0.048854179 0.049698847 0.050063955 0.050841128 0.051547803 0.052194915 0.052289328 0.052414768 0.053011169 0.053637886 0.055003681 0.056112588 0.056444703 0.056730189 0.057016779 0.057179333 0.057796004 0.058630014 0.059266736 0.059769837 0.061357456 0.062152100 0.062937205 0.064325519 0.064585881 0.065108107 0.066042546 0.067574481 0.067860644 0.069016819 0.070520462 0.071880312 0.072338818 0.072787992 0.072976684 0.073244120 0.078694143 0.080625765 0.081959253 0.082990542 0.083675148 0.084606323 0.088970700 0.089432521 0.089830876 0.091334492 0.093334934 0.094582205 0.095500597 0.096293929 0.096867621 0.098561020 0.100186438 0.100704359 0.102777431 0.103989627 0.104634844 0.106843240 0.109238639 0.111055989 0.112313837 0.112874635 0.113990622 0.114815124 0.117017997 0.117420085 0.118635791 0.119207322 0.120683285 0.122254025 0.125106908 0.125870989 0.128573985 0.129048661 0.131066302 0.133860633 0.136600263 0.137811599 0.138616146 0.139663659 0.140450380 0.143439397 0.144606433 0.145908815 0.146813651 0.152005070 0.153604682 0.154153882 0.159932657 0.160873467 0.168573531 0.171464399 0.176166009 0.179116161 0.181640170 0.184531415 0.189142607 0.190336590 0.191988129 0.201367350 0.202240891 0.206309222 0.206967694 0.207269205 0.212446066 0.212597812 0.215634066 0.217013442 0.220446925 0.220954803 0.224617206 0.225147724 0.227160543 0.231900330 0.234605818 0.236113713 0.238585457 0.246337623 0.248561881 0.252650125 0.256563440 0.257230965 0.258331190 0.262576691 0.271582636 0.282929488 0.292038001 0.300125182 0.300210481 0.301099884 0.307149871 0.307796859 0.309854586 0.319997431 0.321371736 0.326464482 0.330921287 0.336684152 0.347769653 0.352031310 0.355652556 0.360858954 0.362107713 0.364155839 0.384571835 0.407242029 0.414477721 0.430287508 0.431856966 0.435399970 0.451136269 0.464755408 0.475686813 0.478876204 0.480487462 0.486533066 0.498905960 0.503911098 0.515216012 0.518053826 0.543840757 0.566941622 0.567736685 0.586773947 0.591876649 0.605879761 0.644298382 0.645547005 0.668090721 0.675625590 0.687423203 0.704075407 0.704169821 0.704435124 0.711069721 0.717276237 0.734300334 0.738033496 0.739759716 0.747237191 0.750853460 0.771616847 0.775990216 0.809164161 0.821855972 0.824158697 0.828944151 0.834304735 0.848210245 0.849552408 0.851415246 0.854650215 0.863501505 0.867474643 0.875942525 0.887577770 0.891299312 0.892378372 0.893688691 0.902131493 0.910346118 0.918011519 0.922817127 0.924572950 0.932021643 0.935941184 0.956129683 0.962872902 0.965346086 0.970099125 0.977466722 0.982584699 0.998664078 1.012999493 1.016305849 1.021931689 1.040230959 1.055127448 1.071301272 1.073118847 1.079763625 1.087417710 1.108543817 1.110439550 1.118306273 1.119246071 1.122636398 1.123986481 1.141898976 1.149850975 1.161768780 1.170198489 1.177304880 1.188670687 1.200777925 1.222135588 1.234210390 1.258234435 1.296506264 1.298516159 1.314750325 1.326483210 1.327525016 1.330251981 1.331443549 1.334816020 1.342465223 1.349214140 1.368839160 1.380015179 1.381341869 1.381889724 1.429576782 1.513834443 1.557991858 1.684838145 1.922927266</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">283</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91989383" y3="-0.95478377" z3="-0.68152952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60376364" y3="-1.95014042" z3="-1.54764422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08598354" y3="-0.99590255" z3="-1.41024381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77550196" y3="1.47718852" z3="-1.06510227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28838744" y3="0.31082945" z3="-0.50044778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65531349" y3="2.73653948" z3="-1.15463179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00488023" y3="2.73506526" z3="-0.84884756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37801848" y3="4.99462553" z3="-0.38233243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80788712" y3="3.85158006" z3="-0.89119163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75172404" y3="5.87075676" z3="-0.18709706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09009034" y3="1.61000602" z3="-1.67793231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12865547" y3="0.35766005" z3="0.21805698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71420297" y3="0.38248784" z3="-0.63847746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61010619" y3="0.73183985" z3="0.29009221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66430011" y3="-0.85845367" z3="-1.50183333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0943977" y3="-2.47496844" z3="-1.3212433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02144357" y3="-5.4902423" z3="-6.27463927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75473378" y3="-5.05588485" z3="-5.30691141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05503521" y3="-3.91549286" z3="-2.84983723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72214083" y3="-3.67541874" z3="-5.15932404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46633605" y3="-5.88271878" z3="-4.21827794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13099771" y3="-5.30642567" z3="-2.99950468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38141864" y3="-3.07350549" z3="-3.93748189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95422474" y3="-3.00796524" z3="-5.99290844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51622798" y3="-6.97044914" z3="-4.31224048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9437571" y3="-5.93969336" z3="-2.12812209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65238754" y3="-3.36757362" z3="-1.60502638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34730148" y3="-3.85038054" z3="-0.85880181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69070444" y3="-4.85280263" z3="-1.12775279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38158874" y3="-3.54915411" z3="0.58993898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41316753" y3="-3.07555909" z3="3.34891251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68923932" y3="-4.58427944" z3="1.48152272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10920978" y3="-2.27269144" z3="1.09125347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12183088" y3="-2.03821147" z3="2.46191741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69637581" y3="-4.34967695" z3="2.85534177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88118789" y3="-5.59217878" z3="1.10134976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09962709" y3="-1.4324576" z3="0.42801908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10529307" y3="-1.03070005" z3="2.8211278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90257589" y3="-5.17417778" z3="3.54279063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41219125" y3="-2.89514581" z3="4.42786993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33508432" y3="-1.73765938" z3="-3.90727034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46901118" y3="-1.33252773" z3="-3.00468848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33759924" y3="3.7102665" z3="-1.04863234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13334406" y3="-2.98317229" z3="-1.70872448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91963778" y3="-3.15988231" z3="-0.56593881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10890527" y3="-2.28588178" z3="0.36757937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83453948" y3="-0.71952003" z3="0.62514141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70440407" y3="-0.25272736" z3="-0.95789863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52455366" y3="0.45608043" z3="1.20861346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07079143" y3="-1.05814669" z3="1.98850525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40558842" y3="-4.37027595" z3="-0.33128009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12309652" y3="-4.60880748" z3="0.87027636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00938013" y3="0.04404694" z3="-1.75885537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36725788" y3="0.61114929" z3="-0.76939954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3289303" y3="-1.08388736" z3="-1.33235145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63605041" y3="0.55623047" z3="0.55864271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.161198" y3="0.15300735" z3="2.20606171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99197041" y3="1.45351199" z3="1.30640424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5331659" y3="-0.11041744" z3="2.31914347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88311606" y3="-1.72859323" z3="1.65681311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57666712" y3="-1.51596791" z3="2.86380717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05941883" y3="-4.02710614" z3="0.88561292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.512314" y3="-4.35329207" z3="1.75001569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35383067" y3="-5.68231664" z3="0.86513914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28130984" y3="-2.19694675" z3="-0.17325215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1373789" y3="-3.29369549" z3="-1.0353126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49303093" y3="-4.45262841" z3="-0.61947762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99771753" y3="-4.50987015" z3="0.67774343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1474723" y3="-3.45220695" z3="1.56983459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78251478" y3="-2.29560642" z3="1.13538867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49312959" y3="-3.22143985" z3="-2.0663544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35030434" y3="-5.29235916" z3="-1.30016165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25993346" y3="-5.69840114" z3="1.10754988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74165915" y3="-3.53427787" z3="2.57920098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87687964" y3="-1.44828533" z3="1.81613024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49183741" y3="4.02230064" z3="0.03705613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86268865" y3="3.80984529" z3="-0.02491275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4017994" y3="3.28420132" z3="-1.19409138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61169842" y3="2.99541394" z3="-2.30393201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24122276" y3="3.20627588" z3="-2.22250117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0460699" y3="4.39072613" z3="0.96420339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51083343" y3="4.02363956" z3="0.82560851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83736014" y3="2.99692029" z3="-1.24861382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07185033" y3="2.59639494" z3="-3.20870455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39191279" y3="2.95606284" z3="-3.0753482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16627346" y3="-5.9108155" z3="2.29545441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76602997" y3="-6.39995108" z3="0.24367167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32205594" y3="2.72040601" z3="-2.32461845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46312477" y3="3.03359341" z3="-0.20569484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62636453" y3="0.16462785" z3="-2.02205185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94996427" y3="1.41137845" z3="-1.88393232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80713219" y3="0.09367539" z3="-2.81180495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28459634" y3="1.20127098" z3="-3.467381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32291209" y3="-0.86766425" z3="-2.89795074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19038702" y3="1.13447332" z3="-4.07636816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45281718" y3="2.53222302" z3="-2.60247325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58823795" y3="2.42999688" z3="-3.36984378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92100614" y3="3.48419484" z3="-2.54687803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95333633" y3="3.30474759" z3="-3.91541212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57818544" y3="3.90674179" z3="-0.25312576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75909439" y3="5.05792353" z3="-0.06221878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92740286" y3="3.9615836" z3="0.19714873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44394799" y3="5.10821265" z3="0.75113551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55730491" y3="3.0748343" z3="0.10515416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48351" y3="5.12425398" z3="1.09053582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32621209" y3="6.23441998" z3="0.50113296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64135366" y3="6.26557992" z3="0.89342277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68817596" y3="7.11447228" z3="0.62801073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06612667" y3="7.17413073" z3="1.32924864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35315533" y3="-3.92927958" z3="-2.87259459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53665196" y3="-4.96501591" z3="-2.54795818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22537472" y3="-3.60340386" z3="-3.47032608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4783095" y3="-3.92408337" z3="-3.5419869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69407091" y3="-1.59552948" z3="-2.09101092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43016512" y3="-1.12009005" z3="-2.76436261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52873197" y3="-0.93443865" z3="-1.22582407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74484196" y3="-1.63952103" z3="-2.64871768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9199,-.9548,-.6815;6.6038,-1.9501,-1.5476;6.086,-.9959,-1.4102;4.7755,1.4772,-1.0651;4.2884,.3108,-.5004;2.6553,2.7365,-1.1546;4.0049,2.7351,-.8488;2.378,4.9946,-.3823;1.8079,3.8516,-.8912;1.7517,5.8708,-.1871;2.0901,1.61,-1.6779;3.1287,.3577,.2181;1.7142,.3825,-.6385;.6101,.7318,.2901;1.6643,-.8585,-1.5018;1.0944,-2.475,-1.3212;2.0214,-5.4902,-6.2746;1.7547,-5.0559,-5.3069;1.055,-3.9155,-2.8498;1.7221,-3.6754,-5.1593;1.4663,-5.8827,-4.2183;1.131,-5.3064,-2.9995;1.3814,-3.0735,-3.9375;1.9542,-3.008,-5.9929;1.5162,-6.9704,-4.3122;.9438,-5.9397,-2.1281;.6524,-3.3676,-1.605;-.3473,-3.8504,-.8588;-.6907,-4.8528,-1.1278;-.3816,-3.5492,.5899;-.4132,-3.0756,3.3489;-.6892,-4.5843,1.4815;-.1092,-2.2727,1.0913;-.1218,-2.0382,2.4619;-.6964,-4.3497,2.8553;-.8812,-5.5922,1.1013;.0996,-1.4325,.428;.1053,-1.0307,2.8211;-.9026,-5.1742,3.5428;-.4122,-2.8951,4.4279;1.3351,-1.7377,-3.9073;1.469,-1.3325,-3.0047;.3376,3.7103,-1.0486;-2.1333,-2.9832,-1.7087;-2.9196,-3.1599,-.5659;-3.1089,-2.2859,.3676;-3.8345,-.7195,.6251;-4.7044,-.2527,-.9579;-2.5246,.4561,1.2086;-5.0708,-1.0581,1.9885;-3.4056,-4.3703,-.3313;-4.1231,-4.6088,.8703;-4.0094,.044,-1.7589;-5.3673,.6111,-.7694;-5.3289,-1.0839,-1.3324;-1.6361,.5562,.5586;-2.1612,.153,2.2061;-2.992,1.4535,1.3064;-5.5332,-.1104,2.3191;-5.8831,-1.7286,1.6568;-4.5767,-1.516,2.8638;-5.0594,-4.0271,.8856;-3.5123,-4.3533,1.75;-4.3538,-5.6823,.8651;4.2813,-2.1969,-.1733;4.1374,-3.2937,-1.0353;3.493,-4.4526,-.6195;2.9977,-4.5099,.6777;3.1475,-3.4522,1.5698;3.7825,-2.2956,1.1354;4.4931,-3.2214,-2.0664;3.3503,-5.2924,-1.3002;2.2599,-5.6984,1.1075;2.7417,-3.5343,2.5792;3.8769,-1.4483,1.8161;-.4918,4.0223,.0371;-1.8627,3.8098,-.0249;-2.4018,3.2842,-1.1941;-1.6117,2.9954,-2.3039;-.2412,3.2063,-2.2225;-.0461,4.3907,.9642;-2.5108,4.0236,.8256;-3.8374,2.9969,-1.2486;-2.0719,2.5964,-3.2087;.3919,2.9561,-3.0753;2.1663,-5.9108,2.2955;1.766,-6.4,.2437;-4.3221,2.7204,-2.3246;-4.4631,3.0336,-.2057;6.6264,.1646,-2.0221;5.95,1.4114,-1.8839;7.8071,.0937,-2.8118;8.2846,1.2013,-3.4674;8.3229,-.8677,-2.898;9.1904,1.1345,-4.0764;6.4528,2.5322,-2.6025;7.5882,2.43,-3.3698;5.921,3.4842,-2.5469;7.9533,3.3047,-3.9154;4.5782,3.9067,-.2531;3.7591,5.0579,-.0622;5.9274,3.9616,.1971;6.4439,5.1082,.7511;6.5573,3.0748,.1052;7.4835,5.1243,1.0905;4.3262,6.2344,.5011;5.6414,6.2656,.8934;3.6882,7.1145,.628;6.0661,7.1741,1.3292;-2.3532,-3.9293,-2.8726;-2.5367,-4.965,-2.548;-3.2254,-3.6034,-3.4703;-1.4783,-3.9241,-3.542;-1.6941,-1.5955,-2.091;-2.4302,-1.1201,-2.7644;-1.5287,-.9344,-1.2258;-.7448,-1.6395,-2.6487;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931786776</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000303499400 0.000051581098 0.011237166355 0.002953403368</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123100 0.000016370 0.000032406 0.000140869 0.000186798 0.000400007 0.000466817 0.000591514 0.000709596 0.000747664 0.000942667 0.001033510 0.001200775 0.001277393 0.001403114 0.001556334 0.001585174 0.001770605 0.001831286 0.002092267 0.002301027 0.002572957 0.002802074 0.003039075 0.003403147 0.003668314 0.003939087 0.004495450 0.004805269 0.004948307 0.005183379 0.005355171 0.006018267 0.006436540 0.006467565 0.006897944 0.006997990 0.007376221 0.008189370 0.008728965 0.008826720 0.009470084 0.009765595 0.009880559 0.010963246 0.011180881 0.011886117 0.012634757 0.013386264 0.013677642 0.013994993 0.014626182 0.014885777 0.015419929 0.015904641 0.016164183 0.016667921 0.018631855 0.019251754 0.019415659 0.020197776 0.020531451 0.021551230 0.021764126 0.022437615 0.022807566 0.023493334 0.023808457 0.024528958 0.025904120 0.026617206 0.026936001 0.027160951 0.027500301 0.028352717 0.028925907 0.030212344 0.030981948 0.031581079 0.034196927 0.034773864 0.036030752 0.039062374 0.039534032 0.041996223 0.045424186 0.046138300 0.046747734 0.048853536 0.049698773 0.050064199 0.050840922 0.051547852 0.052194849 0.052289332 0.052414823 0.053011581 0.053638016 0.055003133 0.056112503 0.056444425 0.056730080 0.057016709 0.057177978 0.057796374 0.058629929 0.059267130 0.059769639 0.061355604 0.062152301 0.062939033 0.064326305 0.064585733 0.065108364 0.066040609 0.067574023 0.067856735 0.069016765 0.070513489 0.071823178 0.072302807 0.072747297 0.072974816 0.073195908 0.078687415 0.080610570 0.081957899 0.082926077 0.083641550 0.084597608 0.088973403 0.089432364 0.089829930 0.091334890 0.093334956 0.094582045 0.095500697 0.096294178 0.096867809 0.098561397 0.100188431 0.100704086 0.102777227 0.103991637 0.104633547 0.106848604 0.109239824 0.111056514 0.112314705 0.112874560 0.113991347 0.114814544 0.117018066 0.117418750 0.118633548 0.119205394 0.120682478 0.122251262 0.125105678 0.125871287 0.128573854 0.129048938 0.131065196 0.133860608 0.136606455 0.137812243 0.138615368 0.139663359 0.140444922 0.143438739 0.144604558 0.145906692 0.146813806 0.152004697 0.153604628 0.154146961 0.159874523 0.160872809 0.168572752 0.171464385 0.176168141 0.179116382 0.181640144 0.184531734 0.189142612 0.190338897 0.191987452 0.201367796 0.202241009 0.206309994 0.206967572 0.207269224 0.212447590 0.212597827 0.215633899 0.217010986 0.220445138 0.220954552 0.224615425 0.225147907 0.227160914 0.231900514 0.234605965 0.236114350 0.238585628 0.246332531 0.248538322 0.252653183 0.256563069 0.257230940 0.258331258 0.262576578 0.271582640 0.282929371 0.292037960 0.300125325 0.300210885 0.301100848 0.307149913 0.307796874 0.309854347 0.319992396 0.321371839 0.326464434 0.330913115 0.336683711 0.347768647 0.352031007 0.355652254 0.360850344 0.362107907 0.364155628 0.384571008 0.407241451 0.414476586 0.430286696 0.431827258 0.435399230 0.451136185 0.464755232 0.475685209 0.478876459 0.480487132 0.486525943 0.498905940 0.503908814 0.515213854 0.518051720 0.543839751 0.566941532 0.567736654 0.586774270 0.591863107 0.605877788 0.644293587 0.645546942 0.668090769 0.675622971 0.687423206 0.704017391 0.704148955 0.704423034 0.711070921 0.717275980 0.734299908 0.738033273 0.739757340 0.747207876 0.750853505 0.771616830 0.775990183 0.809163876 0.821855898 0.824158858 0.828944147 0.834304439 0.848209193 0.849552123 0.851415126 0.854649476 0.863501027 0.867474631 0.875942383 0.887577437 0.891286719 0.892373619 0.893687436 0.902130503 0.910345751 0.918009139 0.922777095 0.924571819 0.932021552 0.935939071 0.956124375 0.962849332 0.965344881 0.970097417 0.977426527 0.982583480 0.998663994 1.012997990 1.016305210 1.021931672 1.040230776 1.055127448 1.071300880 1.073118330 1.079762592 1.087417647 1.108543770 1.110439559 1.118306456 1.119245963 1.122636387 1.123986490 1.141898961 1.149850978 1.161768760 1.170198446 1.177304750 1.188668234 1.200777936 1.222133629 1.234210161 1.258234036 1.296506020 1.298511051 1.314750112 1.326483070 1.327522089 1.330251046 1.331443537 1.334815887 1.342464967 1.349213680 1.368827693 1.380015037 1.381341786 1.381889278 1.429568785 1.513676627 1.557991526 1.684838075 1.922913756</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">284</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91833944" y3="-0.95458475" z3="-0.68139891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60208595" y3="-1.9507102" z3="-1.54687397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08433807" y3="-0.99634892" z3="-1.41023237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77428163" y3="1.47714395" z3="-1.06665952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28710002" y3="0.3112656" z3="-0.50104058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6546396" y3="2.73756331" z3="-1.15435683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00454867" y3="2.73548098" z3="-0.85018028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37931236" y3="4.99583655" z3="-0.38152796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80804995" y3="3.85294986" z3="-0.88947626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75360132" y3="5.87209149" z3="-0.18548322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08823317" y3="1.61139708" z3="-1.67723559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12775853" y3="0.35885798" z3="0.21799864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71282735" y3="0.38388875" z3="-0.63767138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60939251" y3="0.73325352" z3="0.29163665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66222348" y3="-0.85703717" z3="-1.50094443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09464354" y3="-2.47447268" z3="-1.32090472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02668081" y3="-5.4911676" z3="-6.27247247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75902584" y3="-5.05660928" z3="-5.30509417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05706682" y3="-3.91576485" z3="-2.8489421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72620922" y3="-3.67614391" z3="-5.15781485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46959487" y3="-5.88320369" z3="-4.21661021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1331051" y3="-5.3066818" z3="-2.99826702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38430548" y3="-3.07397641" z3="-3.93642889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95899166" y3="-3.00888152" z3="-5.9913145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51956511" y3="-6.97091598" z3="-4.31033651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94498428" y3="-5.93979435" z3="-2.12701802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65341431" y3="-3.36744626" z3="-1.60467179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34616306" y3="-3.85077455" z3="-0.85854325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68911813" y3="-4.85332431" z3="-1.12731944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38152763" y3="-3.54864358" z3="0.5899096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41543265" y3="-3.07279955" z3="3.34832242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.689571" y3="-4.58310509" z3="1.48197901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11012761" y3="-2.27148241" z3="1.09029764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12388073" y3="-2.03582185" z3="2.46071116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69802027" y3="-4.34725342" z3="2.85553961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88123824" y3="-5.59085284" z3="1.10221446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0991193" y3="-1.4318697" z3="0.42645085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10282553" y3="-1.02812126" z3="2.81922903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90425451" y3="-5.17138421" z3="3.54369493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41550878" y3="-2.89148925" z3="4.42709598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33773796" y3="-1.73815732" z3="-3.90655314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47004126" y3="-1.33259412" z3="-3.00396269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33743353" y3="3.71208502" z3="-1.04444792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13254978" y3="-2.9846299" z3="-1.71022634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91955317" y3="-3.16214076" z3="-0.56822907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11140515" y3="-2.28778219" z3="0.36457486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8360985" y3="-0.72118966" z3="0.62194636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70229688" y3="-0.25110635" z3="-0.96213539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52614116" y3="0.45230494" z3="1.2097639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07577456" y3="-1.06066935" z3="1.98198536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40413708" y3="-4.37309233" z3="-0.33400169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12190871" y3="-4.61263274" z3="0.86709033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00604479" y3="0.04989146" z3="-1.76040379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36739863" y3="0.6107868" z3="-0.77215562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32427924" y3="-1.08216353" z3="-1.34111504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63612366" y3="0.55245076" z3="0.56179982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16541294" y3="0.14744789" z3="2.20761347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9926414" y3="1.45003614" z3="1.30787699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5374597" y3="-0.11306186" z3="2.31366809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88833003" y3="-1.7292699" z3="1.64722144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5840544" y3="-1.52099844" z3="2.85727118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05860065" y3="-4.0316918" z3="0.88262008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51162111" y3="-4.3571343" z3="1.74706394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35146125" y3="-5.68659491" z3="0.86176685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27982423" y3="-2.19639855" z3="-0.17220284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13674513" y3="-3.294047" z3="-1.03327803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49283247" y3="-4.45296714" z3="-0.61661321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99687818" y3="-4.50917851" z3="0.68039436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14577202" y3="-3.45057355" z3="1.57154944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7805563" y3="-2.29411312" z3="1.13633467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49292577" y3="-3.22266052" z3="-2.06422462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35103265" y3="-5.29360381" z3="-1.29648732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25928536" y3="-5.69766356" z3="1.11087229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73960889" y3="-3.53191554" z3="2.58082418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87451439" y3="-1.44635313" z3="1.81643368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48975998" y3="4.02110114" z3="0.04373551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86079685" y3="3.80912255" z3="-0.01601728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40230968" y3="3.28704932" z3="-1.18558932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61450424" y3="3.00141066" z3="-2.29791296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24378425" y3="3.21164672" z3="-2.21860847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0419844" y3="4.38674227" z3="0.97101032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.5072413" y3="4.0207128" z3="0.83626052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83817141" y3="3.00080701" z3="-1.23847892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07663412" y3="2.60540768" z3="-3.2029595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3874896" y3="2.96411251" z3="-3.07353117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16523656" y3="-5.90930084" z3="2.29891127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76575451" y3="-6.39984758" z3="0.24729791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32477597" y3="2.72743414" z3="-2.31442711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46229361" y3="3.03521181" z3="-0.19445767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62465869" y3="0.16361522" z3="-2.02315406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9483032" y3="1.41047871" z3="-1.88603005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80532459" y3="0.09197262" z3="-2.81301554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28256748" y3="1.19893216" z3="-3.4698186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32121189" y3="-0.86938393" z3="-2.898223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18830341" y3="1.13161593" z3="-4.07884742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45082071" y3="2.5305988" z3="-2.60592534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58605017" y3="2.42766426" z3="-3.37350031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91889517" y3="3.48256118" z3="-2.55116764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95088821" y3="3.3018415" z3="-3.92015447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57921381" y3="3.90704309" z3="-0.25546673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76095498" y3="5.05870376" z3="-0.06375127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92906336" y3="3.96143056" z3="0.19298656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44701527" y3="5.10811034" z3="0.7455943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55842364" y3="3.0742619" z3="0.10051073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48704622" y3="5.12381763" z3="1.08352399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32955401" y3="6.23524355" z3="0.49800297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64528326" y3="6.26601753" z3="0.88828891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69217799" y3="7.11569285" z3="0.62521526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07122833" y3="7.17465316" z3="1.32279038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35053923" y3="-3.93071081" z3="-2.87427041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53269254" y3="-4.96669031" z3="-2.55014137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22313173" y3="-3.60607855" z3="-3.47222341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47548601" y3="-3.92398614" z3="-3.54336102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69398724" y3="-1.59673333" z3="-2.09212417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42981026" y3="-1.12186143" z3="-2.76614943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5299873" y3="-0.93553499" z3="-1.22682574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74422832" y3="-1.63990577" z3="-2.64893086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9183,-.9546,-.6814;6.6021,-1.9507,-1.5469;6.0843,-.9963,-1.4102;4.7743,1.4771,-1.0667;4.2871,.3113,-.501;2.6546,2.7376,-1.1544;4.0045,2.7355,-.8502;2.3793,4.9958,-.3815;1.808,3.8529,-.8895;1.7536,5.8721,-.1855;2.0882,1.6114,-1.6772;3.1278,.3589,.218;1.7128,.3839,-.6377;.6094,.7333,.2916;1.6622,-.857,-1.5009;1.0946,-2.4745,-1.3209;2.0267,-5.4912,-6.2725;1.759,-5.0566,-5.3051;1.0571,-3.9158,-2.8489;1.7262,-3.6761,-5.1578;1.4696,-5.8832,-4.2166;1.1331,-5.3067,-2.9983;1.3843,-3.074,-3.9364;1.959,-3.0089,-5.9913;1.5196,-6.9709,-4.3103;.945,-5.9398,-2.127;.6534,-3.3674,-1.6047;-.3462,-3.8508,-.8585;-.6891,-4.8533,-1.1273;-.3815,-3.5486,.5899;-.4154,-3.0728,3.3483;-.6896,-4.5831,1.482;-.1101,-2.2715,1.0903;-.1239,-2.0358,2.4607;-.698,-4.3473,2.8555;-.8812,-5.5909,1.1022;.0991,-1.4319,.4265;.1028,-1.0281,2.8192;-.9043,-5.1714,3.5437;-.4155,-2.8915,4.4271;1.3377,-1.7382,-3.9066;1.47,-1.3326,-3.004;.3374,3.7121,-1.0444;-2.1325,-2.9846,-1.7102;-2.9196,-3.1621,-.5682;-3.1114,-2.2878,.3646;-3.8361,-.7212,.6219;-4.7023,-.2511,-.9621;-2.5261,.4523,1.2098;-5.0758,-1.0607,1.982;-3.4041,-4.3731,-.334;-4.1219,-4.6126,.8671;-4.006,.0499,-1.7604;-5.3674,.6108,-.7722;-5.3243,-1.0822,-1.3411;-1.6361,.5525,.5618;-2.1654,.1474,2.2076;-2.9926,1.45,1.3079;-5.5375,-.1131,2.3137;-5.8883,-1.7293,1.6472;-4.5841,-1.521,2.8573;-5.0586,-4.0317,.8826;-3.5116,-4.3571,1.7471;-4.3515,-5.6866,.8618;4.2798,-2.1964,-.1722;4.1367,-3.294,-1.0333;3.4928,-4.453,-.6166;2.9969,-4.5092,.6804;3.1458,-3.4506,1.5715;3.7806,-2.2941,1.1363;4.4929,-3.2227,-2.0642;3.351,-5.2936,-1.2965;2.2593,-5.6977,1.1109;2.7396,-3.5319,2.5808;3.8745,-1.4464,1.8164;-.4898,4.0211,.0437;-1.8608,3.8091,-.016;-2.4023,3.287,-1.1856;-1.6145,3.0014,-2.2979;-.2438,3.2116,-2.2186;-.042,4.3867,.971;-2.5072,4.0207,.8363;-3.8382,3.0008,-1.2385;-2.0766,2.6054,-3.203;.3875,2.9641,-3.0735;2.1652,-5.9093,2.2989;1.7658,-6.3998,.2473;-4.3248,2.7274,-2.3144;-4.4623,3.0352,-.1945;6.6247,.1636,-2.0232;5.9483,1.4105,-1.886;7.8053,.092,-2.813;8.2826,1.1989,-3.4698;8.3212,-.8694,-2.8982;9.1883,1.1316,-4.0788;6.4508,2.5306,-2.6059;7.5861,2.4277,-3.3735;5.9189,3.4826,-2.5512;7.9509,3.3018,-3.9202;4.5792,3.907,-.2555;3.761,5.0587,-.0638;5.9291,3.9614,.193;6.447,5.1081,.7456;6.5584,3.0743,.1005;7.487,5.1238,1.0835;4.3296,6.2352,.498;5.6453,6.266,.8883;3.6922,7.1157,.6252;6.0712,7.1747,1.3228;-2.3505,-3.9307,-2.8743;-2.5327,-4.9667,-2.5501;-3.2231,-3.6061,-3.4722;-1.4755,-3.924,-3.5434;-1.694,-1.5967,-2.0921;-2.4298,-1.1219,-2.7661;-1.53,-.9355,-1.2268;-.7442,-1.6399,-2.6489;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932152240</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000179636979 0.000035562689 0.017644708676 0.004358283933</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002505052150 0.001670034767</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123050 -0.000012728 0.000059774 0.000151549 0.000261808 0.000399490 0.000450470 0.000585856 0.000708031 0.000752685 0.000935386 0.001031611 0.001199014 0.001269330 0.001402105 0.001560870 0.001579580 0.001770056 0.001818717 0.002090167 0.002299870 0.002570875 0.002801683 0.003038933 0.003399109 0.003668846 0.003936866 0.004495558 0.004803628 0.004947115 0.005182811 0.005354889 0.006016151 0.006435621 0.006470440 0.006896232 0.006993235 0.007374396 0.008189665 0.008724176 0.008825008 0.009463786 0.009763835 0.009879973 0.010961886 0.011181390 0.011885435 0.012635318 0.013385955 0.013671294 0.013995029 0.014626017 0.014883097 0.015418742 0.015904805 0.016153078 0.016668827 0.018632806 0.019250916 0.019416211 0.020198625 0.020531786 0.021551596 0.021766091 0.022436272 0.022807486 0.023493051 0.023806874 0.024529347 0.025904268 0.026614727 0.026933050 0.027158147 0.027496784 0.028352183 0.028919628 0.030182148 0.030983519 0.031581024 0.034199636 0.034775307 0.036030567 0.039062385 0.039534681 0.041996312 0.045424300 0.046138587 0.046746022 0.048852912 0.049698783 0.050066453 0.050840603 0.051547917 0.052194835 0.052289338 0.052414889 0.053012225 0.053638652 0.055002485 0.056112556 0.056444398 0.056730113 0.057016662 0.057177275 0.057795941 0.058629937 0.059267219 0.059769810 0.061355006 0.062152782 0.062939077 0.064326297 0.064585791 0.065108356 0.066040813 0.067573605 0.067852137 0.069017012 0.070511907 0.071800642 0.072293131 0.072735237 0.072974572 0.073180849 0.078685601 0.080600198 0.081958848 0.082899444 0.083630904 0.084591434 0.088976073 0.089433895 0.089829952 0.091336027 0.093334918 0.094581997 0.095500795 0.096294294 0.096867855 0.098562074 0.100188984 0.100703789 0.102778518 0.103992117 0.104635458 0.106850706 0.109243229 0.111058440 0.112314997 0.112874926 0.113992428 0.114814069 0.117018040 0.117418584 0.118634606 0.119203086 0.120682608 0.122249810 0.125105030 0.125870505 0.128575052 0.129049913 0.131065289 0.133860855 0.136616918 0.137814552 0.138615984 0.139663037 0.140442271 0.143437886 0.144603071 0.145905843 0.146813543 0.152004857 0.153603814 0.154146647 0.159850861 0.160871199 0.168572929 0.171464265 0.176173109 0.179116371 0.181640042 0.184532435 0.189144593 0.190347383 0.191988578 0.201369212 0.202241220 0.206312788 0.206967643 0.207269226 0.212450913 0.212599484 0.215633903 0.217013179 0.220445210 0.220953754 0.224615637 0.225148055 0.227161295 0.231901239 0.234606416 0.236123594 0.238585919 0.246330204 0.248527403 0.252659689 0.256562941 0.257230947 0.258331318 0.262576275 0.271582649 0.282929135 0.292037925 0.300126385 0.300214378 0.301101850 0.307150076 0.307796821 0.309854290 0.319992895 0.321372086 0.326464307 0.330914513 0.336683660 0.347768705 0.352030747 0.355652147 0.360849359 0.362107899 0.364155554 0.384570588 0.407241907 0.414477681 0.430287046 0.431817085 0.435399403 0.451138016 0.464756337 0.475684922 0.478876747 0.480489501 0.486524475 0.498906102 0.503906273 0.515213146 0.518050803 0.543839866 0.566942022 0.567736966 0.586776684 0.591857119 0.605877163 0.644292478 0.645548656 0.668090940 0.675622404 0.687423088 0.703986068 0.704143376 0.704418464 0.711086550 0.717276035 0.734300010 0.738033115 0.739756693 0.747193566 0.750853867 0.771616834 0.775990188 0.809165775 0.821856330 0.824158934 0.828944169 0.834304315 0.848219883 0.849553408 0.851415033 0.854649598 0.863502772 0.867474836 0.875942454 0.887579110 0.891289716 0.892369696 0.893687322 0.902130174 0.910345097 0.918007918 0.922765447 0.924571480 0.932021642 0.935948227 0.956126683 0.962843192 0.965346153 0.970097761 0.977416125 0.982584469 0.998664857 1.012996717 1.016305091 1.021931998 1.040232532 1.055127470 1.071300353 1.073118634 1.079773203 1.087418296 1.108543719 1.110439571 1.118306177 1.119246275 1.122636412 1.123986650 1.141899003 1.149852656 1.161768811 1.170198452 1.177304748 1.188681474 1.200777974 1.222137370 1.234211787 1.258233919 1.296506417 1.298522335 1.314750440 1.326482956 1.327519445 1.330250939 1.331443384 1.334815843 1.342465094 1.349213874 1.368846154 1.380015114 1.381341920 1.381889306 1.429566481 1.513614278 1.557991279 1.684838465 1.922911391</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">285</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91545689" y3="-0.95488272" z3="-0.68344071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59780053" y3="-1.95161183" z3="-1.55101778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08040086" y3="-0.99712178" z3="-1.41399647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77180702" y3="1.4768679" z3="-1.06896136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28487544" y3="0.3112471" z3="-0.50257456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65277334" y3="2.73876861" z3="-1.15277775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00321303" y3="2.73566372" z3="-0.85087308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38002506" y3="4.9966121" z3="-0.37788732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80732353" y3="3.8544274" z3="-0.88574263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75504117" y3="5.87303423" z3="-0.17999572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08478142" y3="1.6132744" z3="-1.67541034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1264885" y3="0.35951969" z3="0.21796339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71045283" y3="0.38536495" z3="-0.63595281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60825784" y3="0.73450224" z3="0.29493028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65839263" y3="-0.85521986" z3="-1.49967837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09448224" y3="-2.47393856" z3="-1.31970292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03862093" y3="-5.49176075" z3="-6.26797049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76857978" y3="-5.0571466" z3="-5.30129636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0607493" y3="-3.91609358" z3="-2.84686224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73395247" y3="-3.67665618" z3="-5.15461616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47792105" y3="-5.88367533" z3="-4.21302786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13851453" y3="-5.30703153" z3="-2.99558431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38909353" y3="-3.07435752" z3="-3.93411152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9676421" y3="-3.00941927" z3="-5.98791645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52927782" y3="-6.9714036" z3="-4.3061904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9496223" y3="-5.94006692" z3="-2.12439285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65496788" y3="-3.36788841" z3="-1.60323546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34470787" y3="-3.85187461" z3="-0.85785581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68608792" y3="-4.85515317" z3="-1.12618392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38157435" y3="-3.54875719" z3="0.59037243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41704047" y3="-3.07062404" z3="3.34848458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6889483" y3="-4.58285221" z3="1.4832392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11130147" y3="-2.27123313" z3="1.08996237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12578049" y3="-2.03438833" z3="2.46017857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69804896" y3="-4.34593872" z3="2.85667047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87919991" y3="-5.591547" z3="1.10447816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09760636" y3="-1.43211418" z3="0.42543899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09968334" y3="-1.02596786" z3="2.8178091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90411482" y3="-5.16952249" z3="3.5452652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41771372" y3="-2.88840971" z3="4.42714648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34129632" y3="-1.73857875" z3="-3.9050882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4707069" y3="-1.33212704" z3="-3.00243336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33636689" y3="3.7145569" z3="-1.03848574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13169112" y3="-2.98858029" z3="-1.71181468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91917324" y3="-3.16377135" z3="-0.56963236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11110605" y3="-2.28780059" z3="0.36141862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83588427" y3="-0.72061419" z3="0.61638876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69408324" y3="-0.24685229" z3="-0.97109689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52693791" y3="0.44999699" z3="1.21186106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0830276" y3="-1.05987922" z3="1.96965766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40373365" y3="-4.37427153" z3="-0.33269708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12177806" y3="-4.61105916" z3="0.86886981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99403965" y3="0.05957473" z3="-1.76409856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36286315" y3="0.61222769" z3="-0.78119735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31151285" y3="-1.07802622" z3="-1.3573257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63463769" y3="0.55038779" z3="0.56708592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17024752" y3="0.1423206" z3="2.21038117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9925891" y3="1.44808787" z3="1.31072292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54467644" y3="-0.11178295" z3="2.30046328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89513376" y3="-1.72630951" z3="1.62957673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59676441" y3="-1.52254181" z3="2.8468273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05817711" y3="-4.02946871" z3="0.88296198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51148473" y3="-4.35414154" z3="1.74856917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35220383" y3="-5.68464362" z3="0.86517178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27775965" y3="-2.19656553" z3="-0.17287073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13647017" y3="-3.29561644" z3="-1.03246894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49369248" y3="-4.45466973" z3="-0.61457458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99692125" y3="-4.50967094" z3="0.68215487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14406254" y3="-3.44969464" z3="1.5719394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77779753" y3="-2.29310666" z3="1.13554445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49308697" y3="-3.2253328" z3="-2.06334552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35317392" y3="-5.29617784" z3="-1.29346531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26009599" y3="-5.69817762" z3="1.11366857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73717496" y3="-3.52995649" z3="2.58102727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87010696" y3="-1.44416934" z3="1.81452927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4886741" y3="4.02035437" z3="0.05232437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85995109" y3="3.80960696" z3="-0.00588635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40386826" y3="3.29217786" z3="-1.17649868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61813062" y3="3.0095894" z3="-2.29107473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24712333" y3="3.2183185" z3="-2.21328367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03900562" y3="4.38258684" z3="0.98003086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50473837" y3="4.01872073" z3="0.84837959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84007615" y3="3.0077297" z3="-1.22816241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08217721" y3="2.6172839" z3="-3.19680732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38252094" y3="2.97323911" z3="-3.07022483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16588481" y3="-5.9085573" z3="2.30187855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76734579" y3="-6.40170537" z3="0.25072548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32890978" y3="2.74062864" z3="-2.30471996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46231179" y3="3.03737763" z3="-0.18285212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62010894" y3="0.16243414" z3="-2.02817244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94451713" y3="1.40961627" z3="-1.89016287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.7993912" y3="0.0900623" z3="-2.82005522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27601648" y3="1.1966745" z3="-3.47787972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31464733" y3="-0.87158103" z3="-2.90601091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18064267" y3="1.12878927" z3="-4.08851167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4464038" y3="2.52941587" z3="-2.61099231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58028185" y3="2.42578882" z3="-3.38049715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9150374" y3="3.48165596" z3="-2.55542828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94464994" y3="3.2997024" z3="-3.92788528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57955275" y3="3.90651921" z3="-0.2563663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7622333" y3="5.05848791" z3="-0.06236728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93020698" y3="3.95982351" z3="0.18980918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44968241" y3="5.10580024" z3="0.74246248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55893178" y3="3.07242319" z3="0.09582415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49030769" y3="5.12063983" z3="1.0786308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33233476" y3="6.234267" z3="0.49950489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64876505" y3="6.26401313" z3="0.88754318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69557966" y3="7.11495605" z3="0.62871492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07585971" y3="7.17205726" z3="1.32219845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34840024" y3="-3.93776477" z3="-2.87384568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53131952" y3="-4.97290337" z3="-2.54693739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21985846" y3="-3.61435753" z3="-3.47398767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47241373" y3="-3.93332689" z3="-3.54175381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69377714" y3="-1.6011126" z3="-2.09636575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42963463" y3="-1.12797352" z3="-2.77150905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.530468" y3="-0.93816255" z3="-1.23217239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74365366" y3="-1.64482011" z3="-2.65256347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9155,-.9549,-.6834;6.5978,-1.9516,-1.551;6.0804,-.9971,-1.414;4.7718,1.4769,-1.069;4.2849,.3112,-.5026;2.6528,2.7388,-1.1528;4.0032,2.7357,-.8509;2.38,4.9966,-.3779;1.8073,3.8544,-.8857;1.755,5.873,-.18;2.0848,1.6133,-1.6754;3.1265,.3595,.218;1.7105,.3854,-.636;.6083,.7345,.2949;1.6584,-.8552,-1.4997;1.0945,-2.4739,-1.3197;2.0386,-5.4918,-6.268;1.7686,-5.0571,-5.3013;1.0607,-3.9161,-2.8469;1.734,-3.6767,-5.1546;1.4779,-5.8837,-4.213;1.1385,-5.307,-2.9956;1.3891,-3.0744,-3.9341;1.9676,-3.0094,-5.9879;1.5293,-6.9714,-4.3062;.9496,-5.9401,-2.1244;.655,-3.3679,-1.6032;-.3447,-3.8519,-.8579;-.6861,-4.8552,-1.1262;-.3816,-3.5488,.5904;-.417,-3.0706,3.3485;-.6889,-4.5829,1.4832;-.1113,-2.2712,1.09;-.1258,-2.0344,2.4602;-.698,-4.3459,2.8567;-.8792,-5.5915,1.1045;.0976,-1.4321,.4254;.0997,-1.026,2.8178;-.9041,-5.1695,3.5453;-.4177,-2.8884,4.4271;1.3413,-1.7386,-3.9051;1.4707,-1.3321,-3.0024;.3364,3.7146,-1.0385;-2.1317,-2.9886,-1.7118;-2.9192,-3.1638,-.5696;-3.1111,-2.2878,.3614;-3.8359,-.7206,.6164;-4.6941,-.2469,-.9711;-2.5269,.45,1.2119;-5.083,-1.0599,1.9697;-3.4037,-4.3743,-.3327;-4.1218,-4.6111,.8689;-3.994,.0596,-1.7641;-5.3629,.6122,-.7812;-5.3115,-1.078,-1.3573;-1.6346,.5504,.5671;-2.1702,.1423,2.2104;-2.9926,1.4481,1.3107;-5.5447,-.1118,2.3005;-5.8951,-1.7263,1.6296;-4.5968,-1.5225,2.8468;-5.0582,-4.0295,.883;-3.5115,-4.3541,1.7486;-4.3522,-5.6846,.8652;4.2778,-2.1966,-.1729;4.1365,-3.2956,-1.0325;3.4937,-4.4547,-.6146;2.9969,-4.5097,.6822;3.1441,-3.4497,1.5719;3.7778,-2.2931,1.1355;4.4931,-3.2253,-2.0633;3.3532,-5.2962,-1.2935;2.2601,-5.6982,1.1137;2.7372,-3.53,2.581;3.8701,-1.4442,1.8145;-.4887,4.0204,.0523;-1.86,3.8096,-.0059;-2.4039,3.2922,-1.1765;-1.6181,3.0096,-2.2911;-.2471,3.2183,-2.2133;-.039,4.3826,.98;-2.5047,4.0187,.8484;-3.8401,3.0077,-1.2282;-2.0822,2.6173,-3.1968;.3825,2.9732,-3.0702;2.1659,-5.9086,2.3019;1.7673,-6.4017,.2507;-4.3289,2.7406,-2.3047;-4.4623,3.0374,-.1829;6.6201,.1624,-2.0282;5.9445,1.4096,-1.8902;7.7994,.0901,-2.8201;8.276,1.1967,-3.4779;8.3146,-.8716,-2.906;9.1806,1.1288,-4.0885;6.4464,2.5294,-2.611;7.5803,2.4258,-3.3805;5.915,3.4817,-2.5554;7.9446,3.2997,-3.9279;4.5796,3.9065,-.2564;3.7622,5.0585,-.0624;5.9302,3.9598,.1898;6.4497,5.1058,.7425;6.5589,3.0724,.0958;7.4903,5.1206,1.0786;4.3323,6.2343,.4995;5.6488,6.264,.8875;3.6956,7.115,.6287;6.0759,7.1721,1.3222;-2.3484,-3.9378,-2.8738;-2.5313,-4.9729,-2.5469;-3.2199,-3.6144,-3.474;-1.4724,-3.9333,-3.5418;-1.6938,-1.6011,-2.0964;-2.4296,-1.128,-2.7715;-1.5305,-.9382,-1.2322;-.7437,-1.6448,-2.6526;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931613164</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000299442833 0.000054273369 0.020854189392 0.005259846592</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001502791019 0.001001860679</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057123600 -0.000010201 0.000067884 0.000193102 0.000207479 0.000399363 0.000438371 0.000580717 0.000714642 0.000751400 0.000944361 0.001030369 0.001196345 0.001272642 0.001401156 0.001559223 0.001579547 0.001765380 0.001812641 0.002091209 0.002295126 0.002576355 0.002801922 0.003038185 0.003391981 0.003667553 0.003941599 0.004495118 0.004800330 0.004936903 0.005182888 0.005354225 0.006015133 0.006436131 0.006466797 0.006898827 0.006982594 0.007377671 0.008189082 0.008719577 0.008818875 0.009443732 0.009757906 0.009878180 0.010962406 0.011181471 0.011884763 0.012636970 0.013385769 0.013666583 0.013998940 0.014624154 0.014881022 0.015419261 0.015904663 0.016138809 0.016670545 0.018632659 0.019250159 0.019415805 0.020198583 0.020532152 0.021549893 0.021760006 0.022436087 0.022807340 0.023493110 0.023806734 0.024529963 0.025903736 0.026605916 0.026928159 0.027151688 0.027491548 0.028350903 0.028915602 0.030151829 0.030986365 0.031581307 0.034203162 0.034776581 0.036031040 0.039062646 0.039535774 0.041997231 0.045424326 0.046135493 0.046742528 0.048852055 0.049698865 0.050069543 0.050840688 0.051548086 0.052194877 0.052289339 0.052415103 0.053012963 0.053639340 0.055002377 0.056112119 0.056444538 0.056729591 0.057016097 0.057167008 0.057796388 0.058629678 0.059267655 0.059770797 0.061353401 0.062153057 0.062942316 0.064326601 0.064586074 0.065108444 0.066041047 0.067573494 0.067850730 0.069017677 0.070511999 0.071764112 0.072279739 0.072725565 0.072974917 0.073168616 0.078686063 0.080597793 0.081960908 0.082890030 0.083624956 0.084592101 0.088979381 0.089433233 0.089829479 0.091335908 0.093335234 0.094582021 0.095500987 0.096294453 0.096867974 0.098564530 0.100191381 0.100703578 0.102782912 0.103992616 0.104644170 0.106854028 0.109247251 0.111061893 0.112316756 0.112875721 0.113996136 0.114813887 0.117018921 0.117423732 0.118638618 0.119200429 0.120683865 0.122249392 0.125104091 0.125870416 0.128579490 0.129053445 0.131067223 0.133861389 0.136634998 0.137818352 0.138614440 0.139664157 0.140441073 0.143437098 0.144599112 0.145905464 0.146813213 0.152007431 0.153602074 0.154141357 0.159817905 0.160869568 0.168574391 0.171464274 0.176186181 0.179116710 0.181640190 0.184533115 0.189144903 0.190362935 0.191987190 0.201369801 0.202241773 0.206314028 0.206967506 0.207269244 0.212455783 0.212600883 0.215633599 0.217016551 0.220445721 0.220951788 0.224616315 0.225148324 0.227161344 0.231902423 0.234607071 0.236139629 0.238586408 0.246326521 0.248517774 0.252668138 0.256562960 0.257231044 0.258331488 0.262575903 0.271582718 0.282928977 0.292038183 0.300127946 0.300218834 0.301103203 0.307150990 0.307796914 0.309854221 0.319989821 0.321372875 0.326464509 0.330923434 0.336684073 0.347769340 0.352030806 0.355652185 0.360846565 0.362107878 0.364155662 0.384570277 0.407241998 0.414475254 0.430288468 0.431794585 0.435400418 0.451141005 0.464758369 0.475680846 0.478878416 0.480494056 0.486522067 0.498906400 0.503904356 0.515211561 0.518049504 0.543840252 0.566942450 0.567737002 0.586779822 0.591854182 0.605877206 0.644296284 0.645549388 0.668091232 0.675622043 0.687423058 0.703963951 0.704139150 0.704415292 0.711102946 0.717276169 0.734300755 0.738033094 0.739755471 0.747169597 0.750854575 0.771616846 0.775990287 0.809168102 0.821856756 0.824159380 0.828944244 0.834304196 0.848239327 0.849555006 0.851415423 0.854650724 0.863507488 0.867475032 0.875942621 0.887582861 0.891315075 0.892371245 0.893691953 0.902130677 0.910346395 0.918006419 0.922749791 0.924571094 0.932021796 0.935966761 0.956119844 0.962811788 0.965349175 0.970100257 0.977400487 0.982584406 0.998665597 1.012996896 1.016305690 1.021932650 1.040234920 1.055127583 1.071300507 1.073119076 1.079783019 1.087419735 1.108543726 1.110439644 1.118306944 1.119247239 1.122636470 1.123986882 1.141899117 1.149865730 1.161769042 1.170198519 1.177305686 1.188707913 1.200778396 1.222142817 1.234213428 1.258234503 1.296507246 1.298554597 1.314750725 1.326483052 1.327519381 1.330251270 1.331443739 1.334817100 1.342467947 1.349214965 1.368874533 1.380015318 1.381342113 1.381889749 1.429565766 1.513579367 1.557991388 1.684839134 1.922899593</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">286</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91741139" y3="-0.95519323" z3="-0.68362523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59998242" y3="-1.95116365" z3="-1.55160424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08272089" y3="-0.99673497" z3="-1.41361742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77410706" y3="1.47695369" z3="-1.06648725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28669237" y3="0.31071634" z3="-0.50184759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65485807" y3="2.73780095" z3="-1.15366598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0045799" y3="2.73522864" z3="-0.84875627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37911221" y3="4.99495821" z3="-0.37806811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8081891" y3="3.85293802" z3="-0.88832185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75334946" y3="5.8710302" z3="-0.18135989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08871935" y3="1.61199593" z3="-1.67760348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12742537" y3="0.35811229" z3="0.21734828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71249554" y3="0.38441155" z3="-0.63838746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60924884" y3="0.7343331" z3="0.29094842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66112872" y3="-0.85622202" z3="-1.50206499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09387138" y3="-2.47341441" z3="-1.32126689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02914647" y3="-5.49199504" z3="-6.27067923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76062353" y3="-5.05711806" z3="-5.30370862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05677234" y3="-3.91542337" z3="-2.84846355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72716537" y3="-3.67659566" z3="-5.15708187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47074773" y3="-5.88335134" z3="-4.2150339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13333101" y3="-5.30640047" z3="-2.99718587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38425954" y3="-3.07400671" z3="-3.93619721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96029002" y3="-3.009597" z3="-5.99071708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52118666" y3="-6.97111163" z3="-4.3081916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94509921" y3="-5.9392212" z3="-2.12571958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65294483" y3="-3.36683783" z3="-1.60437567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34651957" y3="-3.84975339" z3="-0.85798612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68904037" y3="-4.8527576" z3="-1.12592304">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38107205" y3="-3.54701585" z3="0.59045659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41175128" y3="-3.0702115" z3="3.34889496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68675952" y3="-4.58154701" z3="1.48339651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11016417" y3="-2.2696516" z3="1.09015993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12226406" y3="-2.03350441" z3="2.46053847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69348156" y3="-4.34531425" z3="2.85697072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87754751" y3="-5.59005859" z3="1.10448719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09720111" y3="-1.429976" z3="0.4257943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10382766" y3="-1.02529523" z3="2.81834753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89817278" y3="-5.16928501" z3="3.54551678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41047126" y3="-2.88850614" z3="4.42764373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33723342" y3="-1.73818216" z3="-3.90708637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46906461" y3="-1.33207441" z3="-3.00463597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33781455" y3="3.71236182" z3="-1.04555593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13313024" y3="-2.98491005" z3="-1.70956865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91956136" y3="-3.16108218" z3="-0.56679646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11021406" y3="-2.28605769" z3="0.36541892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83667041" y3="-0.71990363" z3="0.62164995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70446852" y3="-0.25233875" z3="-0.96231018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52724556" y3="0.45531611" z3="1.207056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07441328" y3="-1.05903773" z3="1.98344678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40416748" y3="-4.37166419" z3="-0.33066698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12079845" y3="-4.60963728" z3="0.87149488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00858652" y3="0.04597605" z3="-1.76194198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36805016" y3="0.61095127" z3="-0.77349759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32796956" y3="-1.08336342" z3="-1.33875455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64001737" y3="0.55844029" z3="0.5558709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.161808" y3="0.14909504" z3="2.20283408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99547941" y3="1.45184379" z3="1.30920409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53583491" y3="-0.11136151" z3="2.31575333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88728755" y3="-1.72774719" z3="1.64989583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58140102" y3="-1.51918868" z3="2.85811923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05724776" y3="-4.02812596" z3="0.88718719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50952681" y3="-4.35354122" z3="1.75073218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35116991" y3="-5.68322695" z3="0.86702948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27923226" y3="-2.19720054" z3="-0.17445938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13642355" y3="-3.29495624" z3="-1.03543055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49307058" y3="-4.45406983" z3="-0.61855708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99742573" y3="-4.51045124" z3="0.67856035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14595915" y3="-3.4517107" z3="1.56959046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78014149" y3="-2.2950066" z3="1.13416795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49232264" y3="-3.22350939" z3="-2.0664714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35132972" y3="-5.29457232" z3="-1.29842912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26049214" y3="-5.6991653" z3="1.10933847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73987741" y3="-3.53303776" z3="2.57891481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87357581" y3="-1.4469578" z3="1.81413681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49118556" y3="4.02073096" z3="0.04149375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86204489" y3="3.80842555" z3="-0.02064992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40153229" y3="3.28651534" z3="-1.19129939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6118422" y3="3.00150098" z3="-2.30245133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24138464" y3="3.21227736" z3="-2.22086566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04502882" y3="4.38598368" z3="0.96969532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.509903" y3="4.01939913" z3="0.83079324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83708151" y3="2.99928026" z3="-1.24631901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07235234" y3="2.60554647" z3="-3.20836334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39139875" y3="2.96513854" z3="-3.07487854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16714587" y3="-5.91083313" z3="2.29739451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76680308" y3="-6.40158153" z3="0.2460466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32134396" y3="2.72307114" z3="-2.32263398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46336698" y3="3.03588927" z3="-0.20370631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6229822" y3="0.16355285" z3="-2.0259796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94758945" y3="1.41069958" z3="-1.88662498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80258088" y3="0.09202809" z3="-2.81746858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27978497" y3="1.19945746" z3="-3.47350497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31760125" y3="-0.86962428" z3="-2.90464982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18459359" y3="1.13218266" z3="-4.08393896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45022726" y3="2.53146496" z3="-2.60541571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58444338" y3="2.42865534" z3="-3.3745366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91911451" y3="3.48377258" z3="-2.54870419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94934963" y3="3.30328207" z3="-3.92042055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5789117" y3="3.90586574" z3="-0.25202458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7604253" y3="5.0571316" z3="-0.05874149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92853175" y3="3.95945277" z3="0.19716801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44593543" y3="5.10499564" z3="0.75264921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5580426" y3="3.0725634" z3="0.10319234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48575521" y3="5.12008756" z3="1.09126564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3284488" y3="6.23248783" z3="0.50610292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64386682" y3="6.26245694" z3="0.89750945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69086734" y3="7.11263953" z3="0.6349562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06928668" y3="7.17012861" z3="1.33457013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35145266" y3="-3.9326901" z3="-2.87244199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53451607" y3="-4.96810588" z3="-2.54657943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22335566" y3="-3.60813699" z3="-3.47129703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47614598" y3="-3.92789406" z3="-3.54121769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69509412" y3="-1.59719303" z3="-2.09313205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43139912" y3="-1.12298835" z3="-2.76704095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53064797" y3="-0.93523761" z3="-1.22844862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74550355" y3="-1.64083184" z3="-2.65034431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9174,-.9552,-.6836;6.6,-1.9512,-1.5516;6.0827,-.9967,-1.4136;4.7741,1.477,-1.0665;4.2867,.3107,-.5018;2.6549,2.7378,-1.1537;4.0046,2.7352,-.8488;2.3791,4.995,-.3781;1.8082,3.8529,-.8883;1.7533,5.871,-.1814;2.0887,1.612,-1.6776;3.1274,.3581,.2173;1.7125,.3844,-.6384;.6092,.7343,.2909;1.6611,-.8562,-1.5021;1.0939,-2.4734,-1.3213;2.0291,-5.492,-6.2707;1.7606,-5.0571,-5.3037;1.0568,-3.9154,-2.8485;1.7272,-3.6766,-5.1571;1.4707,-5.8834,-4.215;1.1333,-5.3064,-2.9972;1.3843,-3.074,-3.9362;1.9603,-3.0096,-5.9907;1.5212,-6.9711,-4.3082;.9451,-5.9392,-2.1257;.6529,-3.3668,-1.6044;-.3465,-3.8498,-.858;-.689,-4.8528,-1.1259;-.3811,-3.547,.5905;-.4118,-3.0702,3.3489;-.6868,-4.5815,1.4834;-.1102,-2.2697,1.0902;-.1223,-2.0335,2.4605;-.6935,-4.3453,2.857;-.8775,-5.5901,1.1045;.0972,-1.43,.4258;.1038,-1.0253,2.8183;-.8982,-5.1693,3.5455;-.4105,-2.8885,4.4276;1.3372,-1.7382,-3.9071;1.4691,-1.3321,-3.0046;.3378,3.7124,-1.0456;-2.1331,-2.9849,-1.7096;-2.9196,-3.1611,-.5668;-3.1102,-2.2861,.3654;-3.8367,-.7199,.6216;-4.7045,-.2523,-.9623;-2.5272,.4553,1.2071;-5.0744,-1.059,1.9834;-3.4042,-4.3717,-.3307;-4.1208,-4.6096,.8715;-4.0086,.046,-1.7619;-5.3681,.611,-.7735;-5.328,-1.0834,-1.3388;-1.64,.5584,.5559;-2.1618,.1491,2.2028;-2.9955,1.4518,1.3092;-5.5358,-.1114,2.3158;-5.8873,-1.7277,1.6499;-4.5814,-1.5192,2.8581;-5.0572,-4.0281,.8872;-3.5095,-4.3535,1.7507;-4.3512,-5.6832,.867;4.2792,-2.1972,-.1745;4.1364,-3.295,-1.0354;3.4931,-4.4541,-.6186;2.9974,-4.5105,.6786;3.146,-3.4517,1.5696;3.7801,-2.295,1.1342;4.4923,-3.2235,-2.0665;3.3513,-5.2946,-1.2984;2.2605,-5.6992,1.1093;2.7399,-3.533,2.5789;3.8736,-1.447,1.8141;-.4912,4.0207,.0415;-1.862,3.8084,-.0206;-2.4015,3.2865,-1.1913;-1.6118,3.0015,-2.3025;-.2414,3.2123,-2.2209;-.045,4.386,.9697;-2.5099,4.0194,.8308;-3.8371,2.9993,-1.2463;-2.0724,2.6055,-3.2084;.3914,2.9651,-3.0749;2.1671,-5.9108,2.2974;1.7668,-6.4016,.246;-4.3213,2.7231,-2.3226;-4.4634,3.0359,-.2037;6.623,.1636,-2.026;5.9476,1.4107,-1.8866;7.8026,.092,-2.8175;8.2798,1.1995,-3.4735;8.3176,-.8696,-2.9046;9.1846,1.1322,-4.0839;6.4502,2.5315,-2.6054;7.5844,2.4287,-3.3745;5.9191,3.4838,-2.5487;7.9493,3.3033,-3.9204;4.5789,3.9059,-.252;3.7604,5.0571,-.0587;5.9285,3.9595,.1972;6.4459,5.105,.7526;6.558,3.0726,.1032;7.4858,5.1201,1.0913;4.3284,6.2325,.5061;5.6439,6.2625,.8975;3.6909,7.1126,.635;6.0693,7.1701,1.3346;-2.3515,-3.9327,-2.8724;-2.5345,-4.9681,-2.5466;-3.2234,-3.6081,-3.4713;-1.4761,-3.9279,-3.5412;-1.6951,-1.5972,-2.0931;-2.4314,-1.123,-2.767;-1.5306,-.9352,-1.2284;-.7455,-1.6408,-2.6503;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932036257</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000307255651 0.000052021550 0.018380905346 0.005190691619</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122823 -0.000001246 0.000032454 0.000157174 0.000268110 0.000385156 0.000415591 0.000575879 0.000717140 0.000752770 0.000945571 0.001028064 0.001195558 0.001267136 0.001393678 0.001531985 0.001601806 0.001759008 0.001804382 0.002087539 0.002293895 0.002578465 0.002807049 0.003033896 0.003368653 0.003665999 0.003928998 0.004501562 0.004790066 0.004923636 0.005174673 0.005346438 0.006010517 0.006411140 0.006458473 0.006885061 0.006950809 0.007366433 0.008190004 0.008681976 0.008817068 0.009424017 0.009755839 0.009876185 0.010957877 0.011176622 0.011881793 0.012634844 0.013385294 0.013660141 0.013996041 0.014624920 0.014875987 0.015416075 0.015904930 0.016090777 0.016674353 0.018636197 0.019251872 0.019416325 0.020194107 0.020532195 0.021549391 0.021752475 0.022429821 0.022807646 0.023492422 0.023799114 0.024531490 0.025902545 0.026589652 0.026931724 0.027143447 0.027485628 0.028349880 0.028890012 0.030035756 0.030990077 0.031579183 0.034206990 0.034781554 0.036030148 0.039062632 0.039538423 0.041997246 0.045424172 0.046135253 0.046740076 0.048850694 0.049698916 0.050072966 0.050838875 0.051548222 0.052194391 0.052289302 0.052415659 0.053013805 0.053640433 0.055004321 0.056108902 0.056445204 0.056728264 0.057017665 0.057140397 0.057793540 0.058628668 0.059267852 0.059770849 0.061352473 0.062152782 0.062937955 0.064327400 0.064586358 0.065108740 0.066038690 0.067572760 0.067826794 0.069017785 0.070509628 0.071705637 0.072264572 0.072691683 0.072968217 0.073136531 0.078676191 0.080523900 0.081953123 0.082741591 0.083570124 0.084587229 0.088991526 0.089435648 0.089829322 0.091336792 0.093335217 0.094582238 0.095501203 0.096294366 0.096868471 0.098568215 0.100193358 0.100703684 0.102785285 0.103993985 0.104649389 0.106860112 0.109253536 0.111064370 0.112319968 0.112875614 0.113997984 0.114813635 0.117018861 0.117422128 0.118636186 0.119196785 0.120683771 0.122242486 0.125100929 0.125867353 0.128586215 0.129055886 0.131067445 0.133863348 0.136656301 0.137824442 0.138612103 0.139665834 0.140424248 0.143429608 0.144589997 0.145904366 0.146813851 0.152007089 0.153603449 0.154139881 0.159771256 0.160859134 0.168574780 0.171464624 0.176194960 0.179117559 0.181640627 0.184534610 0.189147164 0.190376448 0.191986971 0.201371071 0.202242134 0.206317169 0.206967546 0.207269279 0.212459676 0.212603921 0.215633558 0.217016474 0.220433473 0.220941845 0.224618025 0.225148737 0.227162590 0.231903160 0.234607590 0.236150346 0.238586684 0.246318848 0.248475400 0.252675928 0.256563296 0.257231148 0.258332223 0.262572965 0.271582761 0.282928211 0.292037522 0.300129126 0.300219909 0.301105089 0.307152069 0.307796936 0.309854057 0.319981778 0.321373219 0.326463909 0.330917562 0.336684061 0.347767944 0.352030314 0.355651747 0.360839181 0.362108097 0.364155352 0.384570180 0.407242591 0.414463203 0.430289532 0.431782351 0.435398240 0.451143653 0.464760383 0.475678548 0.478880970 0.480496317 0.486518589 0.498906544 0.503882210 0.515211187 0.518048206 0.543840263 0.566942341 0.567737211 0.586782408 0.591828777 0.605875801 0.644289235 0.645549517 0.668091370 0.675615685 0.687423162 0.703847682 0.704136344 0.704406795 0.711117821 0.717275639 0.734301577 0.738032798 0.739753875 0.747153355 0.750854827 0.771616903 0.775990313 0.809173224 0.821856858 0.824159832 0.828944262 0.834304209 0.848246389 0.849555070 0.851415658 0.854651798 0.863509156 0.867475217 0.875942712 0.887582844 0.891314235 0.892318499 0.893684571 0.902128374 0.910348009 0.918003875 0.922671914 0.924569759 0.932021954 0.935974649 0.956115205 0.962784966 0.965351245 0.970099318 0.977373244 0.982583540 0.998665866 1.012994093 1.016305731 1.021932850 1.040236865 1.055127803 1.071300594 1.073119253 1.079796205 1.087421865 1.108543782 1.110439757 1.118306609 1.119247197 1.122636448 1.123986933 1.141899189 1.149865721 1.161769272 1.170198579 1.177306815 1.188716118 1.200778866 1.222148644 1.234213717 1.258233858 1.296507059 1.298570408 1.314750915 1.326483118 1.327511805 1.330249140 1.331443920 1.334816898 1.342467929 1.349212227 1.368890299 1.380014272 1.381341328 1.381889653 1.429553993 1.513225365 1.557989624 1.684839632 1.922895772</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">287</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9140122" y3="-0.95555855" z3="-0.68744887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59782681" y3="-1.95118742" z3="-1.55342906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08049523" y3="-0.99677692" z3="-1.41559191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77240211" y3="1.47699763" z3="-1.06780361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28333633" y3="0.3103218" z3="-0.50552966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65441618" y3="2.73973858" z3="-1.15566639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00367372" y3="2.73548152" z3="-0.84888461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3792095" y3="4.99481207" z3="-0.37366259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80806289" y3="3.85459203" z3="-0.88780797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75365158" y3="5.8705982" z3="-0.1743527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08837778" y3="1.61535788" z3="-1.68299695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12288889" y3="0.35743498" z3="0.21174748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70921273" y3="0.38683793" z3="-0.64604284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60535577" y3="0.73767122" z3="0.28229341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6572123" y3="-0.85306386" z3="-1.51064716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09300866" y3="-2.47216595" z3="-1.32610956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0214553" y3="-5.4993065" z3="-6.27188742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75450582" y3="-5.06286514" z3="-5.30514121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05462207" y3="-3.91730538" z3="-2.85056642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72036521" y3="-3.6821279" z3="-5.16088376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46723807" y3="-5.88734148" z3="-4.21445437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13171084" y3="-5.30847133" z3="-2.99696641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37939239" y3="-3.07756405" z3="-3.94037315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95137096" y3="-3.01647499" z3="-5.99617352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51817174" y3="-6.97520848" z3="-4.30581148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94542963" y3="-5.93993783" z3="-2.12414049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65260078" y3="-3.36652611" z3="-1.60679909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34385551" y3="-3.84999856" z3="-0.85675597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68582277" y3="-4.85384926" z3="-1.1216912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37649757" y3="-3.54256571" z3="0.59060615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40107916" y3="-3.05566848" z3="3.34713571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67702236" y3="-4.57460958" z3="1.48794596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10864362" y3="-2.26220106" z3="1.084755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11752456" y3="-2.0209819" z3="2.45418034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68078534" y3="-4.33319108" z3="2.860621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86648879" y3="-5.58444566" z3="1.11296254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09428215" y3="-1.42456326" z3="0.41662283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10662658" y3="-1.01085627" z3="2.80740453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88094394" y3="-5.1553659" z3="3.55299318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39735521" y3="-2.87012524" z3="4.42519239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33137554" y3="-1.74174531" z3="-3.91355043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46398488" y3="-1.33362068" z3="-3.01224443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33760171" y3="3.71504827" z3="-1.04546781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13515323" y3="-2.98991932" z3="-1.70820545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9185381" y3="-3.16405073" z3="-0.5634001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11082926" y3="-2.28530872" z3="0.36543029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83712517" y3="-0.71887908" z3="0.61796217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70059388" y3="-0.25058825" z3="-0.96802049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5280073" y3="0.45495553" z3="1.20676932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08011415" y3="-1.05656288" z3="1.97558891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39926466" y3="-4.37517029" z3="-0.32207594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11182392" y3="-4.61131156" z3="0.88277251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00346381" y3="0.0499132" z3="-1.76561281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36621318" y3="0.61129046" z3="-0.77950787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32189874" y3="-1.08214051" z3="-1.34702425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63809005" y3="0.55591952" z3="0.55866268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16708181" y3="0.1493366" z3="2.20424181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99493242" y3="1.45246003" z3="1.30559425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54137398" y3="-0.10842408" z3="2.30622837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89279351" y3="-1.7241241" z3="1.63885801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59089981" y3="-1.51748206" z3="2.85198472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04949706" y3="-4.03195192" z3="0.90009828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49827703" y3="-4.35158619" z3="1.75922198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33949187" y3="-5.68585583" z3="0.88280167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27572236" y3="-2.19774395" z3="-0.17897296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13479386" y3="-3.29612114" z3="-1.03953388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49330332" y3="-4.45620297" z3="-0.62223322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99738542" y3="-4.51264141" z3="0.67479053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14367216" y3="-3.45309511" z3="1.56527011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77612537" y3="-2.29564092" z3="1.12945497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49121975" y3="-3.22477834" z3="-2.07041146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35370708" y3="-5.29786741" z3="-1.30154106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26262025" y3="-5.70248323" z3="1.10611812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73745296" y3="-3.53463884" z3="2.5745196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86840725" y3="-1.44746866" z3="1.8091367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4910148" y3="4.02069503" z3="0.04257248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86190899" y3="3.8084852" z3="-0.0194526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40182563" y3="3.2893543" z3="-1.19106419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61261261" y3="3.00746602" z3="-2.30331901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24207858" y3="3.21819689" z3="-2.22186141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04445592" y3="4.38343457" z3="0.97157193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50949748" y3="4.01750101" z3="0.83249174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83744179" y3="3.00203812" z3="-1.24622429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07350143" y3="2.61382755" z3="-3.2100011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3902782" y3="2.97351317" z3="-3.07681917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17080283" y3="-5.91459736" z3="2.29427374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76879703" y3="-6.40522946" z3="0.243141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3222508" y3="2.72858825" z3="-2.3228829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46313745" y3="3.03562378" z3="-0.20308729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62225237" y3="0.16397611" z3="-2.02574392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94723047" y3="1.41124653" z3="-1.88595509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80335554" y3="0.09306268" z3="-2.81498857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28236282" y3="1.20124657" z3="-3.46845567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31817057" y3="-0.86865709" z3="-2.90243857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1883933" y3="1.13448411" z3="-4.0770829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45176239" y3="2.53284339" z3="-2.60211637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58742476" y3="2.43063322" z3="-3.36912343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92099694" y3="3.48532799" z3="-2.54488816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95385402" y3="3.30588971" z3="-3.9129859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57817236" y3="3.90404382" z3="-0.24823512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76026294" y3="5.05529847" z3="-0.05280656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92714548" y3="3.95537003" z3="0.20319332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44459356" y3="5.09891715" z3="0.76274699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55615876" y3="3.06826583" z3="0.1076569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48388213" y3="5.11226532" z3="1.10307108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32841226" y3="6.22863697" z3="0.51607198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64324961" y3="6.25654385" z3="0.9095707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69135762" y3="7.10881108" z3="0.64624169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06878128" y3="7.16263034" z3="1.34976344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35386271" y3="-3.94154385" z3="-2.86733355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53402451" y3="-4.9762462" z3="-2.53818771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22826987" y3="-3.62102918" z3="-3.46510769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48003715" y3="-3.93638976" z3="-3.53803421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69937584" y3="-1.60323452" z3="-2.09730921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.436271" y3="-1.13326038" z3="-2.77377554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5364701" y3="-0.93724186" z3="-1.23545989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74980169" y3="-1.64718097" z3="-2.65421125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.914,-.9556,-.6874;6.5978,-1.9512,-1.5534;6.0805,-.9968,-1.4156;4.7724,1.477,-1.0678;4.2833,.3103,-.5055;2.6544,2.7397,-1.1557;4.0037,2.7355,-.8489;2.3792,4.9948,-.3737;1.8081,3.8546,-.8878;1.7537,5.8706,-.1744;2.0884,1.6154,-1.683;3.1229,.3574,.2117;1.7092,.3868,-.646;.6054,.7377,.2823;1.6572,-.8531,-1.5106;1.093,-2.4722,-1.3261;2.0215,-5.4993,-6.2719;1.7545,-5.0629,-5.3051;1.0546,-3.9173,-2.8506;1.7204,-3.6821,-5.1609;1.4672,-5.8873,-4.2145;1.1317,-5.3085,-2.997;1.3794,-3.0776,-3.9404;1.9514,-3.0165,-5.9962;1.5182,-6.9752,-4.3058;.9454,-5.9399,-2.1241;.6526,-3.3665,-1.6068;-.3439,-3.85,-.8568;-.6858,-4.8538,-1.1217;-.3765,-3.5426,.5906;-.4011,-3.0557,3.3471;-.677,-4.5746,1.4879;-.1086,-2.2622,1.0848;-.1175,-2.021,2.4542;-.6808,-4.3332,2.8606;-.8665,-5.5844,1.113;.0943,-1.4246,.4166;.1066,-1.0109,2.8074;-.8809,-5.1554,3.553;-.3974,-2.8701,4.4252;1.3314,-1.7417,-3.9136;1.464,-1.3336,-3.0122;.3376,3.715,-1.0455;-2.1352,-2.9899,-1.7082;-2.9185,-3.1641,-.5634;-3.1108,-2.2853,.3654;-3.8371,-.7189,.618;-4.7006,-.2506,-.968;-2.528,.455,1.2068;-5.0801,-1.0566,1.9756;-3.3993,-4.3752,-.3221;-4.1118,-4.6113,.8828;-4.0035,.0499,-1.7656;-5.3662,.6113,-.7795;-5.3219,-1.0821,-1.347;-1.6381,.5559,.5587;-2.1671,.1493,2.2042;-2.9949,1.4525,1.3056;-5.5414,-.1084,2.3062;-5.8928,-1.7241,1.6389;-4.5909,-1.5175,2.852;-5.0495,-4.032,.9001;-3.4983,-4.3516,1.7592;-4.3395,-5.6859,.8828;4.2757,-2.1977,-.179;4.1348,-3.2961,-1.0395;3.4933,-4.4562,-.6222;2.9974,-4.5126,.6748;3.1437,-3.4531,1.5653;3.7761,-2.2956,1.1295;4.4912,-3.2248,-2.0704;3.3537,-5.2979,-1.3015;2.2626,-5.7025,1.1061;2.7375,-3.5346,2.5745;3.8684,-1.4475,1.8091;-.491,4.0207,.0426;-1.8619,3.8085,-.0195;-2.4018,3.2894,-1.1911;-1.6126,3.0075,-2.3033;-.2421,3.2182,-2.2219;-.0445,4.3834,.9716;-2.5095,4.0175,.8325;-3.8374,3.002,-1.2462;-2.0735,2.6138,-3.21;.3903,2.9735,-3.0768;2.1708,-5.9146,2.2943;1.7688,-6.4052,.2431;-4.3223,2.7286,-2.3229;-4.4631,3.0356,-.2031;6.6223,.164,-2.0257;5.9472,1.4112,-1.886;7.8034,.0931,-2.815;8.2824,1.2012,-3.4685;8.3182,-.8687,-2.9024;9.1884,1.1345,-4.0771;6.4518,2.5328,-2.6021;7.5874,2.4306,-3.3691;5.921,3.4853,-2.5449;7.9539,3.3059,-3.913;4.5782,3.904,-.2482;3.7603,5.0553,-.0528;5.9271,3.9554,.2032;6.4446,5.0989,.7627;6.5562,3.0683,.1077;7.4839,5.1123,1.1031;4.3284,6.2286,.5161;5.6432,6.2565,.9096;3.6914,7.1088,.6462;6.0688,7.1626,1.3498;-2.3539,-3.9415,-2.8673;-2.534,-4.9762,-2.5382;-3.2283,-3.621,-3.4651;-1.48,-3.9364,-3.538;-1.6994,-1.6032,-2.0973;-2.4363,-1.1333,-2.7738;-1.5365,-.9372,-1.2355;-.7498,-1.6472,-2.6542;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930076049</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000449557145 0.000081234993 0.020793699705 0.005403177621</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057122867 -0.000000729 0.000045240 0.000163797 0.000223486 0.000383685 0.000413840 0.000561519 0.000716754 0.000766067 0.000941920 0.001027373 0.001196008 0.001265014 0.001393366 0.001530762 0.001618278 0.001756708 0.001796458 0.002084433 0.002288262 0.002578981 0.002805497 0.003036278 0.003344802 0.003665875 0.003928982 0.004500559 0.004780822 0.004912852 0.005173288 0.005344970 0.006005255 0.006401582 0.006459388 0.006882683 0.006948277 0.007369068 0.008190019 0.008673951 0.008816451 0.009416484 0.009756160 0.009876376 0.010959166 0.011176158 0.011881402 0.012634497 0.013383313 0.013656782 0.013996875 0.014625608 0.014873351 0.015416831 0.015904202 0.016083507 0.016677922 0.018638178 0.019254645 0.019417237 0.020191418 0.020532002 0.021547360 0.021752347 0.022429185 0.022807399 0.023492504 0.023800656 0.024532120 0.025902518 0.026582305 0.026924599 0.027141851 0.027479845 0.028350085 0.028882438 0.029995965 0.030992947 0.031579236 0.034208275 0.034786033 0.036030924 0.039063281 0.039540659 0.041997619 0.045423934 0.046135902 0.046739864 0.048850962 0.049699006 0.050073610 0.050838957 0.051548389 0.052194378 0.052289331 0.052415827 0.053014336 0.053640639 0.055003823 0.056108292 0.056445897 0.056727123 0.057016730 0.057128491 0.057793400 0.058627804 0.059268216 0.059772301 0.061352280 0.062153082 0.062938156 0.064330113 0.064586353 0.065109719 0.066040180 0.067573858 0.067825741 0.069017803 0.070511593 0.071655332 0.072253307 0.072679877 0.072969381 0.073119272 0.078672884 0.080514230 0.081946632 0.082732790 0.083565119 0.084582693 0.088998603 0.089436691 0.089829149 0.091337397 0.093334996 0.094582012 0.095501280 0.096294531 0.096868844 0.098569090 0.100191416 0.100703602 0.102786262 0.103993484 0.104650178 0.106866558 0.109252985 0.111067019 0.112322595 0.112876481 0.114003169 0.114813416 0.117018949 0.117426629 0.118637431 0.119195924 0.120685693 0.122242165 0.125097826 0.125867047 0.128587960 0.129056344 0.131067033 0.133863520 0.136665652 0.137828428 0.138610148 0.139667076 0.140424767 0.143429456 0.144584902 0.145903139 0.146813898 0.152007300 0.153602737 0.154135312 0.159738582 0.160854713 0.168575110 0.171464587 0.176198057 0.179117874 0.181640719 0.184534733 0.189146515 0.190383981 0.191983809 0.201371462 0.202242007 0.206317256 0.206967500 0.207269406 0.212460908 0.212605211 0.215632987 0.217015442 0.220433199 0.220942132 0.224617071 0.225149528 0.227164335 0.231903822 0.234607695 0.236152643 0.238587286 0.246315692 0.248470164 0.252682777 0.256563537 0.257231096 0.258332307 0.262572873 0.271582821 0.282928299 0.292038210 0.300130132 0.300221278 0.301105955 0.307152358 0.307797071 0.309854353 0.319978915 0.321373651 0.326463865 0.330921332 0.336684925 0.347768216 0.352030259 0.355651714 0.360833557 0.362108297 0.364155381 0.384569921 0.407242169 0.414453513 0.430289733 0.431771612 0.435398978 0.451144471 0.464762664 0.475679031 0.478883823 0.480497112 0.486519746 0.498906542 0.503880086 0.515208546 0.518046130 0.543840191 0.566942062 0.567737246 0.586783306 0.591823929 0.605877210 0.644286030 0.645549666 0.668091717 0.675615126 0.687423146 0.703825154 0.704133761 0.704404859 0.711124896 0.717275967 0.734301875 0.738032795 0.739749650 0.747136405 0.750855617 0.771617015 0.775990349 0.809180079 0.821856904 0.824160616 0.828944234 0.834304200 0.848250855 0.849555675 0.851418000 0.854651578 0.863509534 0.867475268 0.875943939 0.887584483 0.891316141 0.892315521 0.893686613 0.902128309 0.910351544 0.918003676 0.922669691 0.924569756 0.932022145 0.935974995 0.956110165 0.962765162 0.965351973 0.970099009 0.977344115 0.982582665 0.998665920 1.012996372 1.016305810 1.021932756 1.040237264 1.055128074 1.071302411 1.073119865 1.079802616 1.087423352 1.108543845 1.110439863 1.118310018 1.119247919 1.122636541 1.123987326 1.141899275 1.149874247 1.161769659 1.170198710 1.177307391 1.188720434 1.200779451 1.222151402 1.234214693 1.258234230 1.296507075 1.298570219 1.314750823 1.326482939 1.327509909 1.330248642 1.331444016 1.334816864 1.342468371 1.349212150 1.368891443 1.380014829 1.381341250 1.381889272 1.429549904 1.513186051 1.557989507 1.684839874 1.922882695</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">288</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91752729" y3="-0.95521504" z3="-0.68426328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59990126" y3="-1.95082285" z3="-1.5530549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08250435" y3="-0.99650677" z3="-1.41479989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77359825" y3="1.47690672" z3="-1.06699859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28666729" y3="0.31058108" z3="-0.50216685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65412641" y3="2.73739067" z3="-1.15318581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00396338" y3="2.73500544" z3="-0.84882817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3784347" y3="4.99440589" z3="-0.37698251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80741532" y3="3.85239804" z3="-0.88722627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75262696" y3="5.87038798" z3="-0.17965931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08792104" y3="1.61153747" z3="-1.67699158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12769438" y3="0.35782982" z3="0.21751253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71246734" y3="0.38377239" z3="-0.63770594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60947998" y3="0.73337336" z3="0.2920497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66114637" y3="-0.8568787" z3="-1.50131686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09454171" y3="-2.47446559" z3="-1.32070231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03121417" y3="-5.49395453" z3="-6.26943837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76228106" y3="-5.05885208" z3="-5.30266053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05749945" y3="-3.91660241" z3="-2.84793082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72926111" y3="-3.6783055" z3="-5.15619256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47142747" y3="-5.88483687" z3="-4.21407732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13353259" y3="-5.30761792" z3="-2.99646541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38588341" y3="-3.07543059" z3="-3.9355583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96311395" y3="-3.01150164" z3="-5.98976727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52148987" y3="-6.97261234" z3="-4.30710634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94461068" y3="-5.94027871" z3="-2.12506204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65337307" y3="-3.36757298" z3="-1.60412233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34604594" y3="-3.85063946" z3="-0.85765677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68910477" y3="-4.85325957" z3="-1.12605502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38090393" y3="-3.54817814" z3="0.59076843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41229603" y3="-3.07224082" z3="3.34921819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68726741" y3="-4.58282309" z3="1.48321588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11004147" y3="-2.27078528" z3="1.09081792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12251117" y3="-2.03511804" z3="2.46124978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69441697" y3="-4.34695421" z3="2.85679766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87851202" y3="-5.59083185" z3="1.10375345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09780673" y3="-1.4310059" z3="0.42676682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10380372" y3="-1.0271935" z3="2.81947566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89933012" y3="-5.17118382" z3="3.5451683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41129311" y3="-2.89091894" z3="4.42799734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33934717" y3="-1.73959998" z3="-3.90656458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47055402" y3="-1.33340378" z3="-3.00411227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33698098" y3="3.71193779" z3="-1.04400094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13265518" y3="-2.98465941" z3="-1.7094753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91923043" y3="-3.1604989" z3="-0.56693271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11045899" y3="-2.28475677" z3="0.36472801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83619131" y3="-0.71831735" z3="0.62020236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70165461" y3="-0.24981175" z3="-0.96470496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52657867" y3="0.45566928" z3="1.2076221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07635129" y3="-1.05674806" z3="1.98009874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40401671" y3="-4.37100454" z3="-0.3307429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12076567" y3="-4.60878749" z3="0.8713272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00486969" y3="0.05032264" z3="-1.7628147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36680628" y3="0.61232708" z3="-0.77596817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32342497" y3="-1.08119919" z3="-1.34323752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63846388" y3="0.55846769" z3="0.55751529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16253301" y3="0.14880766" z3="2.2036265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9941358" y3="1.45256506" z3="1.30946426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53743434" y3="-0.10876969" z3="2.31166179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88934141" y3="-1.72480768" z3="1.64533113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58500295" y3="-1.51728345" z3="2.85551691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0570439" y3="-4.02711622" z3="0.88722228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50933196" y3="-4.35291634" z3="1.75042881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35123266" y3="-5.68254246" z3="0.8672833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27972284" y3="-2.19727069" z3="-0.17476605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13688518" y3="-3.29526909" z3="-1.03545361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49370241" y3="-4.45438794" z3="-0.61819838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99806636" y3="-4.51039105" z3="0.67894205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14676167" y3="-3.45145699" z3="1.56973447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78096289" y3="-2.29489889" z3="1.13399855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49266212" y3="-3.22409744" z3="-2.06656189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35222631" y3="-5.29536124" z3="-1.29774863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26105978" y3="-5.69897332" z3="1.11002519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74093227" y3="-3.53264174" z3="2.57916099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87479001" y3="-1.44694011" z3="1.81386914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49171709" y3="4.0208847" z3="0.04305905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86270153" y3="3.80925155" z3="-0.01882478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40261759" y3="3.28748253" z3="-1.18927308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6132382" y3="3.00183991" z3="-2.30045738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24263938" y3="3.21185836" z3="-2.21911708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04525336" y3="4.38614052" z3="0.97110234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51037354" y3="4.02080405" z3="0.83252804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83841762" y3="3.00137361" z3="-1.24422828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07408901" y3="2.60604808" z3="-3.20623707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38991804" y3="2.96419693" z3="-3.07308199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16775724" y3="-5.91041164" z3="2.29815631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76722369" y3="-6.40143775" z3="0.24685674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32328136" y3="2.72699215" z3="-2.32068349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46423242" y3="3.03689142" z3="-0.20126424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62225325" y3="0.16391419" z3="-2.02737719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94668559" y3="1.41091874" z3="-1.88768066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80150093" y3="0.09270627" z3="-2.81939282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27814441" y3="1.20028031" z3="-3.47560605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31671304" y3="-0.86881053" z3="-2.90683251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18268968" y3="1.13325119" z3="-4.08643136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44872059" y3="2.53183435" z3="-2.60665515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58258522" y3="2.42931845" z3="-3.37630049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91741594" y3="3.484016" z3="-2.54961367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94703462" y3="3.30404863" z3="-3.92232971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57844488" y3="3.90560695" z3="-0.25215991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75991728" y3="5.05672534" z3="-0.0583436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92824589" y3="3.95930263" z3="0.19650547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44579263" y3="5.10483392" z3="0.75187157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5578091" y3="3.07248909" z3="0.10215567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48575245" y3="5.12002445" z3="1.09006624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32811166" y3="6.23208618" z3="0.50628894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64370823" y3="6.26218219" z3="0.89711454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69052922" y3="7.11211376" z3="0.6353331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06928965" y3="7.16985482" z3="1.33398269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35123894" y3="-3.93208338" z3="-2.87228181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5345665" y3="-4.96742434" z3="-2.54672831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22332654" y3="-3.60739438" z3="-3.47095284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47595844" y3="-3.9271455" z3="-3.54109897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69370793" y3="-1.59736519" z3="-2.09312559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42958704" y3="-1.1229747" z3="-2.76748063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52917583" y3="-0.93524561" z3="-1.22859257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74417829" y3="-1.64149908" z3="-2.65020153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9175,-.9552,-.6843;6.5999,-1.9508,-1.5531;6.0825,-.9965,-1.4148;4.7736,1.4769,-1.067;4.2867,.3106,-.5022;2.6541,2.7374,-1.1532;4.004,2.735,-.8488;2.3784,4.9944,-.377;1.8074,3.8524,-.8872;1.7526,5.8704,-.1797;2.0879,1.6115,-1.677;3.1277,.3578,.2175;1.7125,.3838,-.6377;.6095,.7334,.292;1.6611,-.8569,-1.5013;1.0945,-2.4745,-1.3207;2.0312,-5.494,-6.2694;1.7623,-5.0589,-5.3027;1.0575,-3.9166,-2.8479;1.7293,-3.6783,-5.1562;1.4714,-5.8848,-4.2141;1.1335,-5.3076,-2.9965;1.3859,-3.0754,-3.9356;1.9631,-3.0115,-5.9898;1.5215,-6.9726,-4.3071;.9446,-5.9403,-2.1251;.6534,-3.3676,-1.6041;-.346,-3.8506,-.8577;-.6891,-4.8533,-1.1261;-.3809,-3.5482,.5908;-.4123,-3.0722,3.3492;-.6873,-4.5828,1.4832;-.11,-2.2708,1.0908;-.1225,-2.0351,2.4612;-.6944,-4.347,2.8568;-.8785,-5.5908,1.1038;.0978,-1.431,.4268;.1038,-1.0272,2.8195;-.8993,-5.1712,3.5452;-.4113,-2.8909,4.428;1.3393,-1.7396,-3.9066;1.4706,-1.3334,-3.0041;.337,3.7119,-1.044;-2.1327,-2.9847,-1.7095;-2.9192,-3.1605,-.5669;-3.1105,-2.2848,.3647;-3.8362,-.7183,.6202;-4.7017,-.2498,-.9647;-2.5266,.4557,1.2076;-5.0764,-1.0567,1.9801;-3.404,-4.371,-.3307;-4.1208,-4.6088,.8713;-4.0049,.0503,-1.7628;-5.3668,.6123,-.776;-5.3234,-1.0812,-1.3432;-1.6385,.5585,.5575;-2.1625,.1488,2.2036;-2.9941,1.4526,1.3095;-5.5374,-.1088,2.3117;-5.8893,-1.7248,1.6453;-4.585,-1.5173,2.8555;-5.057,-4.0271,.8872;-3.5093,-4.3529,1.7504;-4.3512,-5.6825,.8673;4.2797,-2.1973,-.1748;4.1369,-3.2953,-1.0355;3.4937,-4.4544,-.6182;2.9981,-4.5104,.6789;3.1468,-3.4515,1.5697;3.781,-2.2949,1.134;4.4927,-3.2241,-2.0666;3.3522,-5.2954,-1.2977;2.2611,-5.699,1.11;2.7409,-3.5326,2.5792;3.8748,-1.4469,1.8139;-.4917,4.0209,.0431;-1.8627,3.8093,-.0188;-2.4026,3.2875,-1.1893;-1.6132,3.0018,-2.3005;-.2426,3.2119,-2.2191;-.0453,4.3861,.9711;-2.5104,4.0208,.8325;-3.8384,3.0014,-1.2442;-2.0741,2.606,-3.2062;.3899,2.9642,-3.0731;2.1678,-5.9104,2.2982;1.7672,-6.4014,.2469;-4.3233,2.727,-2.3207;-4.4642,3.0369,-.2013;6.6223,.1639,-2.0274;5.9467,1.4109,-1.8877;7.8015,.0927,-2.8194;8.2781,1.2003,-3.4756;8.3167,-.8688,-2.9068;9.1827,1.1333,-4.0864;6.4487,2.5318,-2.6067;7.5826,2.4293,-3.3763;5.9174,3.484,-2.5496;7.947,3.304,-3.9223;4.5784,3.9056,-.2522;3.7599,5.0567,-.0583;5.9282,3.9593,.1965;6.4458,5.1048,.7519;6.5578,3.0725,.1022;7.4858,5.12,1.0901;4.3281,6.2321,.5063;5.6437,6.2622,.8971;3.6905,7.1121,.6353;6.0693,7.1699,1.334;-2.3512,-3.9321,-2.8723;-2.5346,-4.9674,-2.5467;-3.2233,-3.6074,-3.471;-1.476,-3.9271,-3.5411;-1.6937,-1.5974,-2.0931;-2.4296,-1.123,-2.7675;-1.5292,-.9352,-1.2286;-.7442,-1.6415,-2.6502;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932329642</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000169834830 0.000027987825 0.023132464791 0.005209431603</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002649633169 0.001766422112</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057124050 -0.000173857 0.000051980 0.000115313 0.000275524 0.000382037 0.000405831 0.000562694 0.000714669 0.000763961 0.000935732 0.001022509 0.001193102 0.001256943 0.001392603 0.001524759 0.001622702 0.001751704 0.001790397 0.002084114 0.002287565 0.002582898 0.002809013 0.003034090 0.003334472 0.003666203 0.003932765 0.004502727 0.004777194 0.004909256 0.005173537 0.005343763 0.006004835 0.006398537 0.006465607 0.006879978 0.006942274 0.007373819 0.008190262 0.008671158 0.008816274 0.009410967 0.009756059 0.009875722 0.010961282 0.011177414 0.011881219 0.012634557 0.013383214 0.013658213 0.013997252 0.014626214 0.014872198 0.015416952 0.015904011 0.016071722 0.016685126 0.018641324 0.019252623 0.019418947 0.020192455 0.020532769 0.021547726 0.021754010 0.022427609 0.022807221 0.023492243 0.023800546 0.024534121 0.025902545 0.026578299 0.026921414 0.027140040 0.027475684 0.028349819 0.028862308 0.029955688 0.031000765 0.031580064 0.034215586 0.034791682 0.036031406 0.039063369 0.039547197 0.041997734 0.045423856 0.046139147 0.046739208 0.048852341 0.049699412 0.050078620 0.050838764 0.051548607 0.052194524 0.052289333 0.052416129 0.053015835 0.053641775 0.055004544 0.056108483 0.056446956 0.056727522 0.057018346 0.057129406 0.057793710 0.058627585 0.059268669 0.059774405 0.061352491 0.062154371 0.062939444 0.064330983 0.064586370 0.065110188 0.066043891 0.067574086 0.067821250 0.069018480 0.070508685 0.071624709 0.072247383 0.072670146 0.072968668 0.073100473 0.078674369 0.080503270 0.081945604 0.082703623 0.083556126 0.084587497 0.089011529 0.089441357 0.089828872 0.091339960 0.093335069 0.094582120 0.095501456 0.096295190 0.096869239 0.098570684 0.100192005 0.100704571 0.102791261 0.103994095 0.104655441 0.106876061 0.109261529 0.111072247 0.112328833 0.112877265 0.114006469 0.114812968 0.117019400 0.117431408 0.118639174 0.119193779 0.120686035 0.122241621 0.125098898 0.125867385 0.128594814 0.129059159 0.131069797 0.133865334 0.136706668 0.137838540 0.138611527 0.139671803 0.140423526 0.143429583 0.144583119 0.145903032 0.146814243 0.152008601 0.153605958 0.154134927 0.159707304 0.160853584 0.168575619 0.171464749 0.176217741 0.179119208 0.181640974 0.184536058 0.189152625 0.190411817 0.191988256 0.201372819 0.202242851 0.206324810 0.206967565 0.207269442 0.212467836 0.212612544 0.215633102 0.217018304 0.220433167 0.220940388 0.224618947 0.225149612 0.227165113 0.231905261 0.234608179 0.236168773 0.238587523 0.246312884 0.248463553 0.252687056 0.256563464 0.257231342 0.258332736 0.262572934 0.271582994 0.282928494 0.292038338 0.300133891 0.300231974 0.301108611 0.307153650 0.307797225 0.309854510 0.319977293 0.321374405 0.326464071 0.330920905 0.336686254 0.347768232 0.352030253 0.355651711 0.360833669 0.362108205 0.364155395 0.384571054 0.407242420 0.414452183 0.430292559 0.431751603 0.435399838 0.451149234 0.464769955 0.475681621 0.478888257 0.480501181 0.486518951 0.498906784 0.503879680 0.515207123 0.518045035 0.543841023 0.566942316 0.567737416 0.586789865 0.591817676 0.605876147 0.644288475 0.645550425 0.668092672 0.675614485 0.687423219 0.703796904 0.704132590 0.704403705 0.711152795 0.717275929 0.734303079 0.738032842 0.739749920 0.747122971 0.750855831 0.771617089 0.775990396 0.809189789 0.821857358 0.824161172 0.828944254 0.834304300 0.848264740 0.849558262 0.851420436 0.854653484 0.863513834 0.867475701 0.875944202 0.887587274 0.891338426 0.892316706 0.893692828 0.902128570 0.910355885 0.918003345 0.922664016 0.924569492 0.932022449 0.935993888 0.956111636 0.962750059 0.965356576 0.970102249 0.977321237 0.982583060 0.998666676 1.013000414 1.016306580 1.021933479 1.040241686 1.055128522 1.071304775 1.073120647 1.079832946 1.087426968 1.108544323 1.110440019 1.118310740 1.119248553 1.122636548 1.123987396 1.141899344 1.149879199 1.161770513 1.170198899 1.177309840 1.188742117 1.200780365 1.222160913 1.234215263 1.258235180 1.296507743 1.298616723 1.314751430 1.326483363 1.327511156 1.330249713 1.331445113 1.334817391 1.342472144 1.349212604 1.368914822 1.380015861 1.381341808 1.381889469 1.429545823 1.513130613 1.557989602 1.684841048 1.922875812</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">289</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91861711" y3="-0.9551717" z3="-0.68765552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60125213" y3="-1.94867065" z3="-1.55835997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08300121" y3="-0.99494622" z3="-1.41922301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77202607" y3="1.47703376" z3="-1.06898709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28658076" y3="0.30990389" z3="-0.50460616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65142106" y3="2.73611086" z3="-1.15200658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00157753" y3="2.73431388" z3="-0.8488133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3750476" y3="4.99170811" z3="-0.37233188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80422402" y3="3.85011899" z3="-0.88373075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74897801" y3="5.8669709" z3="-0.17414937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08578064" y3="1.61047471" z3="-1.67703162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12792853" y3="0.3557044" z3="0.21570996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71233093" y3="0.3810582" z3="-0.63890909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60946198" y3="0.72905496" z3="0.29165361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66170043" y3="-0.85909101" z3="-1.50327391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09650539" y3="-2.47818767" z3="-1.32067875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02581475" y3="-5.50346209" z3="-6.26800541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75878154" y3="-5.06727575" z3="-5.30119331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05838165" y3="-3.92212075" z3="-2.84641447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72847401" y3="-3.68662712" z3="-5.15550601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46762234" y3="-5.892023" z3="-4.21173656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13208642" y3="-5.31337539" z3="-2.99419152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38733353" y3="-3.08226977" z3="-3.93491475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96270822" y3="-3.02079753" z3="-5.98975224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51560857" y3="-6.97995391" z3="-4.30405104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94307408" y3="-5.94512358" z3="-2.12214567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65570321" y3="-3.37223953" z3="-1.60244989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34456756" y3="-3.85318942" z3="-0.85616715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68830206" y3="-4.85582646" z3="-1.12402354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37941064" y3="-3.55068141" z3="0.59224493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41139138" y3="-3.07443499" z3="3.35065312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68607739" y3="-4.58536462" z3="1.48486838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10772313" y3="-2.27382658" z3="1.09233365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12059864" y3="-2.03784964" z3="2.4627029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69331938" y3="-4.34947593" z3="2.85847105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87717669" y3="-5.59392796" z3="1.10582138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10034911" y3="-1.43413255" z3="0.42808704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10555995" y3="-1.02974143" z3="2.82079759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89919417" y3="-5.17336086" z3="3.54661698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41073515" y3="-2.89288219" z3="4.42941952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34348591" y3="-1.74633253" z3="-3.90717631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47356265" y3="-1.33907992" z3="-3.00498058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33359098" y3="3.71040938" z3="-1.03936043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13025528" y3="-2.98673481" z3="-1.70900616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91687461" y3="-3.15819057" z3="-0.56557074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10604978" y3="-2.2802086" z3="0.3639878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8317004" y3="-0.71228297" z3="0.61374843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68643154" y3="-0.24251424" z3="-0.97698886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52308049" y3="0.45844836" z3="1.20948585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08257692" y3="-1.04666476" z3="1.96467612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40326326" y3="-4.36731955" z3="-0.32564491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12011669" y3="-4.60052838" z3="0.87739479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98508615" y3="0.06509595" z3="-1.7683266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35843214" y3="0.61459429" z3="-0.78970891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3002925" y3="-1.07589784" z3="-1.36411834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63033959" y3="0.55717764" z3="0.56510382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16716371" y3="0.15164809" z3="2.20874657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98829686" y3="1.4567318" z3="1.30714041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5453614" y3="-0.09708692" z3="2.29004011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89368452" y3="-1.71441948" z3="1.6248248">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59898907" y3="-1.50555874" z3="2.84528023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05593224" y3="-4.01791773" z3="0.89098794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5085554" y3="-4.34198274" z3="1.75580471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35165514" y3="-5.67372829" z3="0.87633022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28239445" y3="-2.19784655" z3="-0.17764977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13921637" y3="-3.29587575" z3="-1.03815275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49646245" y3="-4.45500738" z3="-0.62037459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00193469" y3="-4.51120716" z3="0.67717859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15122224" y3="-3.45228984" z3="1.5678389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78478277" y3="-2.29556174" z3="1.13154809">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49404757" y3="-3.2245259" z3="-2.06956228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35383305" y3="-5.2953245" z3="-1.30000167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26502386" y3="-5.699656" z3="1.10890735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74605018" y3="-3.53339934" z3="2.57753779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8785162" y3="-1.44719725" z3="1.81120594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.494012" y3="4.02242453" z3="0.04779976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86549389" y3="3.81381306" z3="-0.01314685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40724662" y3="3.29239421" z3="-1.18303283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61897394" y3="3.00345286" z3="-2.29420813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24768937" y3="3.20978478" z3="-2.21342691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04639059" y3="4.38810097" z3="0.97516403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51222567" y3="4.02775746" z3="0.83850769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8437693" y3="3.01034544" z3="-1.23701067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08119714" y3="2.60800002" z3="-3.19953822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38393787" y3="2.95941177" z3="-3.06734724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17183187" y3="-5.91043886" z3="2.29708591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77120284" y3="-6.40270894" z3="0.24622128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33140127" y3="2.74437699" z3="-2.3144016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46744927" y3="3.04059278" z3="-0.19262507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62115174" y3="0.16637697" z3="-2.03157778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94462922" y3="1.41270987" z3="-1.89044901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79987005" y3="0.09685296" z3="-2.8245399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27513104" y3="1.20541144" z3="-3.4801108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31584951" y3="-0.86414199" z3="-2.9132063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17928348" y3="1.13965895" z3="-4.09165821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44528011" y3="2.53471252" z3="-2.60867633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57870536" y3="2.43382893" z3="-3.37917115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91324051" y3="3.48640108" z3="-2.55035776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94212437" y3="3.30936965" z3="-3.92458987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57569447" y3="3.90426269" z3="-0.25059914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75650959" y3="5.05446245" z3="-0.05415712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92575628" y3="3.95802945" z3="0.19728823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44268028" y3="5.10276005" z3="0.75486186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55598004" y3="3.07190218" z3="0.10074955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48278945" y3="5.11796728" z3="1.09258851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32401934" y3="6.22905531" z3="0.51278444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63971895" y3="6.25920835" z3="0.90319903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6857434" y3="7.1083798" z3="0.64444307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06470896" y3="7.16619039" z3="1.3421039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35042592" y3="-3.93778911" z3="-2.86914453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53655316" y3="-4.97165089" z3="-2.53969467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22082041" y3="-3.61255569" z3="-3.46960993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47472965" y3="-3.93788669" z3="-3.53748911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68999504" y3="-1.60080692" z3="-2.09647794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42537577" y3="-1.12779317" z3="-2.7718974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52471649" y3="-0.93645163" z3="-1.23378819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74013024" y3="-1.64729378" z3="-2.65312096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9186,-.9552,-.6877;6.6013,-1.9487,-1.5584;6.083,-.9949,-1.4192;4.772,1.477,-1.069;4.2866,.3099,-.5046;2.6514,2.7361,-1.152;4.0016,2.7343,-.8488;2.375,4.9917,-.3723;1.8042,3.8501,-.8837;1.749,5.867,-.1741;2.0858,1.6105,-1.677;3.1279,.3557,.2157;1.7123,.3811,-.6389;.6095,.7291,.2917;1.6617,-.8591,-1.5033;1.0965,-2.4782,-1.3207;2.0258,-5.5035,-6.268;1.7588,-5.0673,-5.3012;1.0584,-3.9221,-2.8464;1.7285,-3.6866,-5.1555;1.4676,-5.892,-4.2117;1.1321,-5.3134,-2.9942;1.3873,-3.0823,-3.9349;1.9627,-3.0208,-5.9898;1.5156,-6.98,-4.3041;.9431,-5.9451,-2.1221;.6557,-3.3722,-1.6024;-.3446,-3.8532,-.8562;-.6883,-4.8558,-1.124;-.3794,-3.5507,.5922;-.4114,-3.0744,3.3507;-.6861,-4.5854,1.4849;-.1077,-2.2738,1.0923;-.1206,-2.0378,2.4627;-.6933,-4.3495,2.8585;-.8772,-5.5939,1.1058;.1003,-1.4341,.4281;.1056,-1.0297,2.8208;-.8992,-5.1734,3.5466;-.4107,-2.8929,4.4294;1.3435,-1.7463,-3.9072;1.4736,-1.3391,-3.005;.3336,3.7104,-1.0394;-2.1303,-2.9867,-1.709;-2.9169,-3.1582,-.5656;-3.106,-2.2802,.364;-3.8317,-.7123,.6137;-4.6864,-.2425,-.977;-2.5231,.4584,1.2095;-5.0826,-1.0467,1.9647;-3.4033,-4.3673,-.3256;-4.1201,-4.6005,.8774;-3.9851,.0651,-1.7683;-5.3584,.6146,-.7897;-5.3003,-1.0759,-1.3641;-1.6303,.5572,.5651;-2.1672,.1516,2.2087;-2.9883,1.4567,1.3071;-5.5454,-.0971,2.29;-5.8937,-1.7144,1.6248;-4.599,-1.5056,2.8453;-5.0559,-4.0179,.891;-3.5086,-4.342,1.7558;-4.3517,-5.6737,.8763;4.2824,-2.1978,-.1776;4.1392,-3.2959,-1.0382;3.4965,-4.455,-.6204;3.0019,-4.5112,.6772;3.1512,-3.4523,1.5678;3.7848,-2.2956,1.1315;4.494,-3.2245,-2.0696;3.3538,-5.2953,-1.3;2.265,-5.6997,1.1089;2.7461,-3.5334,2.5775;3.8785,-1.4472,1.8112;-.494,4.0224,.0478;-1.8655,3.8138,-.0131;-2.4072,3.2924,-1.183;-1.619,3.0035,-2.2942;-.2477,3.2098,-2.2134;-.0464,4.3881,.9752;-2.5122,4.0278,.8385;-3.8438,3.0103,-1.237;-2.0812,2.608,-3.1995;.3839,2.9594,-3.0673;2.1718,-5.9104,2.2971;1.7712,-6.4027,.2462;-4.3314,2.7444,-2.3144;-4.4674,3.0406,-.1926;6.6212,.1664,-2.0316;5.9446,1.4127,-1.8904;7.7999,.0969,-2.8245;8.2751,1.2054,-3.4801;8.3158,-.8641,-2.9132;9.1793,1.1397,-4.0917;6.4453,2.5347,-2.6087;7.5787,2.4338,-3.3792;5.9132,3.4864,-2.5504;7.9421,3.3094,-3.9246;4.5757,3.9043,-.2506;3.7565,5.0545,-.0542;5.9258,3.958,.1973;6.4427,5.1028,.7549;6.556,3.0719,.1007;7.4828,5.118,1.0926;4.324,6.2291,.5128;5.6397,6.2592,.9032;3.6857,7.1084,.6444;6.0647,7.1662,1.3421;-2.3504,-3.9378,-2.8691;-2.5366,-4.9717,-2.5397;-3.2208,-3.6126,-3.4696;-1.4747,-3.9379,-3.5375;-1.69,-1.6008,-2.0965;-2.4254,-1.1278,-2.7719;-1.5247,-.9365,-1.2338;-.7401,-1.6473,-2.6531;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929005974</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000926751357 0.000131013221 0.018006823055 0.005455435126</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057124456 -0.000029351 0.000038238 0.000069203 0.000245275 0.000378377 0.000401700 0.000556353 0.000713053 0.000762057 0.000936382 0.001021973 0.001191825 0.001256998 0.001392623 0.001525727 0.001626033 0.001750456 0.001791038 0.002084614 0.002291867 0.002584737 0.002812825 0.003036027 0.003333844 0.003667297 0.003935067 0.004503923 0.004776567 0.004906637 0.005174558 0.005345328 0.006004413 0.006395382 0.006466532 0.006883097 0.006943176 0.007380094 0.008190824 0.008670731 0.008815759 0.009409596 0.009756739 0.009875892 0.010962668 0.011177608 0.011881618 0.012634438 0.013383002 0.013661915 0.013997903 0.014626100 0.014872429 0.015417651 0.015903835 0.016074344 0.016689560 0.018642038 0.019252629 0.019420508 0.020193951 0.020533629 0.021547340 0.021753034 0.022427805 0.022807463 0.023492355 0.023800355 0.024534239 0.025902697 0.026579842 0.026920522 0.027139838 0.027475466 0.028349731 0.028863448 0.029951391 0.031004334 0.031580886 0.034217743 0.034793515 0.036031891 0.039063956 0.039549959 0.041998090 0.045424472 0.046139361 0.046738621 0.048852535 0.049699641 0.050079674 0.050838789 0.051548722 0.052195461 0.052289370 0.052416176 0.053016646 0.053641740 0.055004303 0.056108160 0.056447143 0.056727019 0.057018186 0.057124416 0.057794133 0.058627354 0.059268949 0.059775189 0.061352333 0.062155205 0.062939424 0.064332346 0.064586424 0.065110536 0.066043480 0.067574692 0.067824248 0.069018500 0.070509892 0.071615890 0.072248780 0.072669507 0.072968957 0.073099650 0.078676501 0.080504357 0.081946591 0.082701461 0.083555568 0.084589537 0.089017687 0.089441521 0.089829016 0.091340037 0.093335037 0.094582106 0.095501515 0.096295579 0.096869482 0.098571133 0.100191153 0.100704447 0.102794091 0.103993971 0.104657915 0.106882257 0.109265849 0.111074583 0.112334031 0.112877685 0.114008482 0.114813125 0.117020109 0.117434071 0.118638953 0.119194205 0.120686661 0.122241393 0.125098177 0.125867238 0.128597510 0.129060691 0.131070134 0.133865929 0.136720766 0.137843103 0.138611473 0.139677307 0.140423105 0.143429457 0.144582151 0.145902915 0.146814410 0.152009563 0.153605516 0.154134178 0.159702075 0.160854338 0.168575842 0.171464719 0.176231582 0.179121510 0.181640890 0.184536239 0.189154386 0.190423291 0.191988143 0.201373053 0.202243372 0.206326101 0.206967636 0.207269487 0.212471094 0.212615829 0.215633740 0.217019305 0.220431583 0.220941004 0.224619012 0.225149809 0.227165275 0.231906058 0.234608282 0.236173178 0.238587809 0.246312020 0.248462997 0.252690382 0.256563741 0.257231564 0.258333117 0.262572977 0.271583426 0.282928567 0.292038874 0.300134690 0.300234233 0.301110092 0.307154989 0.307797512 0.309854976 0.319977072 0.321375368 0.326464411 0.330920933 0.336686896 0.347768286 0.352030217 0.355651710 0.360833209 0.362108916 0.364155442 0.384571786 0.407243364 0.414451545 0.430295051 0.431752922 0.435400893 0.451151501 0.464772180 0.475681292 0.478892719 0.480502345 0.486521821 0.498906789 0.503880262 0.515207672 0.518045005 0.543843473 0.566942332 0.567737537 0.586793708 0.591816872 0.605878137 0.644288641 0.645550945 0.668093284 0.675614335 0.687423411 0.703794030 0.704132617 0.704403589 0.711166667 0.717276153 0.734303698 0.738033106 0.739750702 0.747122901 0.750856191 0.771617247 0.775990469 0.809200994 0.821857431 0.824161622 0.828944239 0.834304826 0.848272073 0.849560023 0.851423641 0.854656244 0.863517344 0.867475951 0.875944822 0.887588043 0.891347139 0.892323996 0.893696334 0.902129076 0.910362720 0.918004319 0.922674441 0.924569565 0.932022844 0.936004495 0.956113959 0.962753874 0.965360678 0.970104025 0.977317661 0.982583055 0.998666699 1.013006695 1.016306998 1.021934682 1.040245660 1.055129607 1.071305858 1.073120771 1.079859454 1.087432262 1.108544758 1.110440119 1.118311645 1.119250280 1.122636573 1.123987556 1.141899421 1.149887963 1.161771361 1.170198939 1.177313385 1.188759755 1.200781509 1.222163533 1.234215947 1.258237178 1.296507888 1.298657529 1.314751468 1.326483379 1.327511129 1.330249639 1.331446143 1.334819555 1.342474215 1.349213174 1.368934826 1.380016098 1.381342624 1.381889403 1.429545649 1.513121567 1.557990145 1.684842685 1.922879626</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">290</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92345566" y3="-0.95426478" z3="-0.68317091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60856114" y3="-1.94711756" z3="-1.5498252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08945152" y3="-0.99363462" z3="-1.41212494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77525246" y3="1.4775156" z3="-1.0664936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29012431" y3="0.31039477" z3="-0.50183387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6530927" y3="2.73380834" z3="-1.15450107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00287133" y3="2.73414404" z3="-0.84947227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37344118" y3="4.99122133" z3="-0.38061724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80425923" y3="3.84759999" z3="-0.88952747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74613457" y3="5.86661676" z3="-0.18417271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08925023" y3="1.6067042" z3="-1.67820923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13051415" y3="0.35548462" z3="0.21697471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71591317" y3="0.37798871" z3="-0.63922691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61154109" y3="0.72549733" z3="0.28970277">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66782283" y3="-0.86298269" z3="-1.502536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09751058" y3="-2.48071979" z3="-1.32052541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01374889" y3="-5.49939458" z3="-6.27473344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74937632" y3="-5.06412608" z3="-5.30676129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05510436" y3="-3.92139369" z3="-2.84928764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71996394" y3="-3.68352287" z3="-5.15956549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4608048" y3="-5.89000048" z3="-4.21746394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12819178" y3="-5.31255169" z3="-2.99849654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38215102" y3="-3.08044761" z3="-3.9374741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95231581" y3="-3.01685347" z3="-5.99368998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50835525" y3="-6.97787542" z3="-4.31108911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94076182" y3="-5.94509948" z3="-2.1266879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65395762" y3="-3.37224156" z3="-1.60450721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34615893" y3="-3.85430073" z3="-0.85793915">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69163967" y3="-4.85558874" z3="-1.12797133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3803649" y3="-3.55440509" z3="0.59098458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.414708" y3="-3.08382181" z3="3.35025562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69118847" y3="-4.58986192" z3="1.4809104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10646544" y3="-2.27857982" z3="1.09383095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12055578" y3="-2.04565384" z3="2.46476588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69984371" y3="-4.35665579" z3="2.85488867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88533376" y3="-5.59611006" z3="1.09890561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1048843" y3="-1.43801041" z3="0.43188299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10806219" y3="-1.03922943" z3="2.8255866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90814218" y3="-5.18172691" z3="3.54151593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41504603" y3="-2.90460597" z3="4.42938314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33910933" y3="-1.7445232" z3="-3.90755488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47284067" y3="-1.33927262" z3="-3.0050448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33386795" y3="3.7060399" z3="-1.04537808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13127525" y3="-2.98281045" z3="-1.70757929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91794706" y3="-3.15691688" z3="-0.56483307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10669117" y3="-2.28050923" z3="0.36694127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82951936" y3="-0.71257827" z3="0.62083177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6915649" y3="-0.24348965" z3="-0.96574381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51868411" y3="0.4588079" z3="1.21042207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07399725" y3="-1.04746852" z3="1.97767161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40636484" y3="-4.36602997" z3="-0.32915035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12455017" y3="-4.60177964" z3="0.87252635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99382795" y3="0.05992363" z3="-1.76180453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3601216" y3="0.616034" z3="-0.77739119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30985935" y3="-1.07617741" z3="-1.34724901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62545428" y3="0.55382007" z3="0.56596013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16335022" y3="0.1563739" z3="2.21085258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.9823038" y3="1.45851919" z3="1.30279022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53582094" y3="-0.09824725" z3="2.30407084">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88611126" y3="-1.71659734" z3="1.64283162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58569541" y3="-1.50493254" z3="2.85631435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05966228" y3="-4.018474" z3="0.88741002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51338945" y3="-4.34650057" z3="1.75188827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35691382" y3="-5.67526241" z3="0.8693164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28601279" y3="-2.19690452" z3="-0.17465265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14068743" y3="-3.29331393" z3="-1.03688312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49585337" y3="-4.45198806" z3="-0.62077649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00135805" y3="-4.50899803" z3="0.67679774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15299984" y3="-3.45183939" z3="1.56915587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78874808" y3="-2.2957772" z3="1.13453075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4957173" y3="-3.22104184" z3="-2.06819509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3523502" y3="-5.29198758" z3="-1.30140724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26279231" y3="-5.6970331" z3="1.10701035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74827617" y3="-3.53403905" z3="2.57893303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88505565" y3="-1.4492549" z3="1.81563067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49459224" y3="4.02342381" z3="0.03960937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86591119" y3="3.81417018" z3="-0.02128556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40661013" y3="3.28635259" z3="-1.18865895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61753074" y3="2.99172959" z3="-2.29768241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24649853" y3="3.19908078" z3="-2.21729555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04785629" y3="4.39431072" z3="0.96533591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51331364" y3="4.03261238" z3="0.82856121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84311764" y3="3.00418429" z3="-1.24238327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07892198" y3="2.59131893" z3="-3.20123468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38568904" y3="2.94444614" z3="-3.06948192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16910144" y3="-5.90911584" z3="2.29504706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76834264" y3="-6.39843007" z3="0.24333468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33048887" y3="2.73465845" z3="-2.3188859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46691606" y3="3.03772169" z3="-0.19809892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62808093" y3="0.16788465" z3="-2.0237261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94972667" y3="1.41358746" z3="-1.88544943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80914006" y3="0.09903283" z3="-2.81328736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28495318" y3="1.2075359" z3="-3.46855061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32659972" y3="-0.86140165" z3="-2.89946425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19106696" y3="1.14235641" z3="-4.07727736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45079227" y3="2.53534352" z3="-2.60379909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58652917" y3="2.43509663" z3="-3.37101673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91736497" y3="3.48642721" z3="-2.54810041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95028867" y3="3.31051187" z3="-3.91641208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57503721" y3="3.90614175" z3="-0.25321635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75461359" y3="5.05620773" z3="-0.06140581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92423315" y3="3.96241369" z3="0.19698309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43941278" y3="5.10939097" z3="0.75158822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5552165" y3="3.07644264" z3="0.10447298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47891776" y3="5.12652895" z3="1.09106087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32041905" y3="6.2331971" z3="0.50220887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63554315" y3="6.26577536" z3="0.89438323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68133988" y3="7.11234355" z3="0.62929602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05932617" y3="7.17462721" z3="1.33052011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35392217" y3="-3.92856201" z3="-2.87081952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5392676" y3="-4.96371948" z3="-2.54612562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22643052" y3="-3.60144004" z3="-3.46779555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47968802" y3="-3.92480814" z3="-3.54098641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68868483" y3="-1.59656102" z3="-2.09106639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42341917" y3="-1.1202255" z3="-2.76544746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5220828" y3="-0.93477558" z3="-1.22666119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73981125" y3="-1.64311902" z3="-2.64875218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9235,-.9543,-.6832;6.6086,-1.9471,-1.5498;6.0895,-.9936,-1.4121;4.7753,1.4775,-1.0665;4.2901,.3104,-.5018;2.6531,2.7338,-1.1545;4.0029,2.7341,-.8495;2.3734,4.9912,-.3806;1.8043,3.8476,-.8895;1.7461,5.8666,-.1842;2.0893,1.6067,-1.6782;3.1305,.3555,.217;1.7159,.378,-.6392;.6115,.7255,.2897;1.6678,-.863,-1.5025;1.0975,-2.4807,-1.3205;2.0137,-5.4994,-6.2747;1.7494,-5.0641,-5.3068;1.0551,-3.9214,-2.8493;1.72,-3.6835,-5.1596;1.4608,-5.89,-4.2175;1.1282,-5.3126,-2.9985;1.3822,-3.0804,-3.9375;1.9523,-3.0169,-5.9937;1.5084,-6.9779,-4.3111;.9408,-5.9451,-2.1267;.654,-3.3722,-1.6045;-.3462,-3.8543,-.8579;-.6916,-4.8556,-1.128;-.3804,-3.5544,.591;-.4147,-3.0838,3.3503;-.6912,-4.5899,1.4809;-.1065,-2.2786,1.0938;-.1206,-2.0457,2.4648;-.6998,-4.3567,2.8549;-.8853,-5.5961,1.0989;.1049,-1.438,.4319;.1081,-1.0392,2.8256;-.9081,-5.1817,3.5415;-.415,-2.9046,4.4294;1.3391,-1.7445,-3.9076;1.4728,-1.3393,-3.005;.3339,3.706,-1.0454;-2.1313,-2.9828,-1.7076;-2.9179,-3.1569,-.5648;-3.1067,-2.2805,.3669;-3.8295,-.7126,.6208;-4.6916,-.2435,-.9657;-2.5187,.4588,1.2104;-5.074,-1.0475,1.9777;-3.4064,-4.366,-.3292;-4.1246,-4.6018,.8725;-3.9938,.0599,-1.7618;-5.3601,.616,-.7774;-5.3099,-1.0762,-1.3472;-1.6255,.5538,.566;-2.1634,.1564,2.2109;-2.9823,1.4585,1.3028;-5.5358,-.0982,2.3041;-5.8861,-1.7166,1.6428;-4.5857,-1.5049,2.8563;-5.0597,-4.0185,.8874;-3.5134,-4.3465,1.7519;-4.3569,-5.6753,.8693;4.286,-2.1969,-.1747;4.1407,-3.2933,-1.0369;3.4959,-4.452,-.6208;3.0014,-4.509,.6768;3.153,-3.4518,1.5692;3.7887,-2.2958,1.1345;4.4957,-3.221,-2.0682;3.3524,-5.292,-1.3014;2.2628,-5.697,1.107;2.7483,-3.534,2.5789;3.8851,-1.4493,1.8156;-.4946,4.0234,.0396;-1.8659,3.8142,-.0213;-2.4066,3.2864,-1.1887;-1.6175,2.9917,-2.2977;-.2465,3.1991,-2.2173;-.0479,4.3943,.9653;-2.5133,4.0326,.8286;-3.8431,3.0042,-1.2424;-2.0789,2.5913,-3.2012;.3857,2.9444,-3.0695;2.1691,-5.9091,2.295;1.7683,-6.3984,.2433;-4.3305,2.7347,-2.3189;-4.4669,3.0377,-.1981;6.6281,.1679,-2.0237;5.9497,1.4136,-1.8854;7.8091,.099,-2.8133;8.285,1.2075,-3.4686;8.3266,-.8614,-2.8995;9.1911,1.1424,-4.0773;6.4508,2.5353,-2.6038;7.5865,2.4351,-3.371;5.9174,3.4864,-2.5481;7.9503,3.3105,-3.9164;4.575,3.9061,-.2532;3.7546,5.0562,-.0614;5.9242,3.9624,.197;6.4394,5.1094,.7516;6.5552,3.0764,.1045;7.4789,5.1265,1.0911;4.3204,6.2332,.5022;5.6355,6.2658,.8944;3.6813,7.1123,.6293;6.0593,7.1746,1.3305;-2.3539,-3.9286,-2.8708;-2.5393,-4.9637,-2.5461;-3.2264,-3.6014,-3.4678;-1.4797,-3.9248,-3.541;-1.6887,-1.5966,-2.0911;-2.4234,-1.1202,-2.7654;-1.5221,-.9348,-1.2267;-.7398,-1.6431,-2.6488;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928305517</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000739220083 0.000108851791 0.021503702103 0.005373113861</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057125249 -0.000060611 0.000039813 0.000096706 0.000264487 0.000381560 0.000402913 0.000560152 0.000720500 0.000763237 0.000936612 0.001022281 0.001192672 0.001257714 0.001393219 0.001525099 0.001628545 0.001751027 0.001789674 0.002084771 0.002294941 0.002587943 0.002814930 0.003038264 0.003332335 0.003667279 0.003936206 0.004511518 0.004775904 0.004906643 0.005174644 0.005344618 0.006004924 0.006395343 0.006472517 0.006883134 0.006942877 0.007388526 0.008190980 0.008669500 0.008815833 0.009409165 0.009756550 0.009875843 0.010962727 0.011181788 0.011882954 0.012634455 0.013383259 0.013669832 0.013998621 0.014626542 0.014873644 0.015418750 0.015903915 0.016078662 0.016695667 0.018642235 0.019256016 0.019422825 0.020196578 0.020534454 0.021547475 0.021753072 0.022428485 0.022808102 0.023492372 0.023800658 0.024535510 0.025902842 0.026580592 0.026924470 0.027140155 0.027475418 0.028350236 0.028868250 0.029952228 0.031010283 0.031580999 0.034223353 0.034796741 0.036032383 0.039064780 0.039554689 0.041998524 0.045425683 0.046139858 0.046741625 0.048853834 0.049699832 0.050082392 0.050838818 0.051548887 0.052196440 0.052289404 0.052416366 0.053017779 0.053641755 0.055004666 0.056108878 0.056447396 0.056727278 0.057019928 0.057129830 0.057794501 0.058627368 0.059268969 0.059776550 0.061352451 0.062157503 0.062939180 0.064333060 0.064586428 0.065110926 0.066044454 0.067575087 0.067829676 0.069019077 0.070511997 0.071616158 0.072250861 0.072670219 0.072969397 0.073102334 0.078678505 0.080505837 0.081946828 0.082701192 0.083555281 0.084595958 0.089026387 0.089443062 0.089829050 0.091340368 0.093335046 0.094582381 0.095501636 0.096295771 0.096869641 0.098571495 0.100192237 0.100704774 0.102797261 0.103994071 0.104663008 0.106891019 0.109277069 0.111078935 0.112342967 0.112878292 0.114009034 0.114813872 0.117020748 0.117435428 0.118639836 0.119194328 0.120686654 0.122242100 0.125098576 0.125867465 0.128604603 0.129063884 0.131071750 0.133868323 0.136741914 0.137852492 0.138611882 0.139682574 0.140424551 0.143430546 0.144582365 0.145903002 0.146814523 0.152010450 0.153608630 0.154134802 0.159702853 0.160854681 0.168575916 0.171464957 0.176256172 0.179126404 0.181641642 0.184536564 0.189160773 0.190439207 0.191989362 0.201373263 0.202243487 0.206330447 0.206967716 0.207269533 0.212474799 0.212623764 0.215634071 0.217020639 0.220432727 0.220941028 0.224620290 0.225149916 0.227165498 0.231906887 0.234608353 0.236183134 0.238587816 0.246312290 0.248468950 0.252690404 0.256564569 0.257232420 0.258333825 0.262573063 0.271584055 0.282929225 0.292039062 0.300136328 0.300241189 0.301112285 0.307157705 0.307797752 0.309855401 0.319977243 0.321377242 0.326464915 0.330921870 0.336686933 0.347768374 0.352030324 0.355651741 0.360834447 0.362109907 0.364155507 0.384572994 0.407245692 0.414453975 0.430297453 0.431753103 0.435401781 0.451154913 0.464777109 0.475683071 0.478901571 0.480503992 0.486529146 0.498906824 0.503880509 0.515207954 0.518045048 0.543846814 0.566942590 0.567738080 0.586800069 0.591818460 0.605882122 0.644289472 0.645552540 0.668094319 0.675614429 0.687423480 0.703793859 0.704134964 0.704403727 0.711192458 0.717276329 0.734304121 0.738033356 0.739754754 0.747130829 0.750856233 0.771617638 0.775990701 0.809222758 0.821857439 0.824161915 0.828944280 0.834305991 0.848279852 0.849563695 0.851425660 0.854658057 0.863520214 0.867476345 0.875946379 0.887589712 0.891376219 0.892324976 0.893702092 0.902129290 0.910379303 0.918004650 0.922678699 0.924569601 0.932023420 0.936018410 0.956125871 0.962756112 0.965365894 0.970106430 0.977321804 0.982583782 0.998666738 1.013018839 1.016307725 1.021936805 1.040253807 1.055131917 1.071308009 1.073120852 1.079914035 1.087443131 1.108545991 1.110440259 1.118311920 1.119253364 1.122636580 1.123987901 1.141899674 1.149893428 1.161773162 1.170198958 1.177322350 1.188783163 1.200783864 1.222168089 1.234216343 1.258241336 1.296507930 1.298731527 1.314751578 1.326483492 1.327512931 1.330251303 1.331446329 1.334821460 1.342476778 1.349213890 1.368963137 1.380016369 1.381342969 1.381889480 1.429545980 1.513122516 1.557990668 1.684844993 1.922880542</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">291</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91695922" y3="-0.95509118" z3="-0.68453085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59978467" y3="-1.95071078" z3="-1.55246255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08228477" y3="-0.9964017" z3="-1.41451949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77319725" y3="1.4770225" z3="-1.06733537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28600613" y3="0.31069953" z3="-0.50270965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6538724" y3="2.73785787" z3="-1.15362209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0036974" y3="2.73520748" z3="-0.84916813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37847702" y3="4.99475609" z3="-0.37677473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8072738" y3="3.852922" z3="-0.88723585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75270686" y3="5.87079498" z3="-0.17875719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08755581" y3="1.61220397" z3="-1.67776203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12683461" y3="0.35795004" z3="0.21663926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7117483" y3="0.38426191" z3="-0.63882852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60868779" y3="0.73393695" z3="0.2908255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66032009" y3="-0.85630705" z3="-1.50256131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.0943676" y3="-2.47452588" z3="-1.3213712">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02940934" y3="-5.49428099" z3="-6.27031959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76097297" y3="-5.05914192" z3="-5.30342142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05727184" y3="-3.91680816" z3="-2.84845463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72757255" y3="-3.67856422" z3="-5.15712494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47113929" y3="-5.88510793" z3="-4.21453582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13376026" y3="-5.30784184" z3="-2.99680826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38479025" y3="-3.07564957" z3="-3.93634683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96065802" y3="-3.01177316" z3="-5.99093342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52155307" y3="-6.97289947" z3="-4.3074387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94553718" y3="-5.94046836" z3="-2.12521937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65338305" y3="-3.36768533" z3="-1.60461249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34536936" y3="-3.85137549" z3="-0.85753159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68798362" y3="-4.85424193" z3="-1.12548848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38004303" y3="-3.54813751" z3="0.59070468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41078784" y3="-3.07030078" z3="3.34881105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6859003" y3="-4.58225406" z3="1.48389345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1096011" y3="-2.27021833" z3="1.0897841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1216653" y3="-2.03361659" z3="2.46006242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69276626" y3="-4.34538969" z3="2.85731759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8771642" y3="-5.59033361" z3="1.10503819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09781385" y3="-1.43090926" z3="0.42509339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10458783" y3="-1.02545822" z3="2.8175204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89712201" y3="-5.16925192" z3="3.54643512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40951605" y3="-2.88825674" z3="4.4274761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33795018" y3="-1.73983794" z3="-3.90747045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46926653" y3="-1.3334441" z3="-3.00511733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33676247" y3="3.71267602" z3="-1.04346643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1330819" y3="-2.98670317" z3="-1.70933753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91909133" y3="-3.16167404" z3="-0.56629423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11034372" y3="-2.28485312" z3="0.36447254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83563237" y3="-0.71820391" z3="0.61917721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69877512" y3="-0.24862007" z3="-0.96660794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52617532" y3="0.45481824" z3="1.20868536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07833977" y3="-1.05637188" z3="1.97680553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4035624" y3="-4.37203444" z3="-0.32879815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11988293" y3="-4.60875755" z3="0.87377729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00106257" y3="0.05293834" z3="-1.76334848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36497357" y3="0.61270568" z3="-0.77803169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31928265" y3="-1.08013299" z3="-1.34696901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63624371" y3="0.55594086" z3="0.56068465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16517601" y3="0.14863012" z3="2.20595875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99282917" y3="1.45240417" z3="1.30811679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53992037" y3="-0.1082493" z3="2.3070318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89073063" y3="-1.72446686" z3="1.64072245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58883899" y3="-1.51664209" z3="2.85334136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05622884" y3="-4.02733578" z3="0.88949385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50824141" y3="-4.35190018" z3="1.75239985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3500625" y3="-5.68265019" z3="0.87107077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27906946" y3="-2.19714733" z3="-0.17517051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13663471" y3="-3.29521129" z3="-1.03582198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49369884" y3="-4.45447465" z3="-0.61859076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99785222" y3="-4.51045995" z3="0.67847593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14611125" y3="-3.45145647" z3="1.56921799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78008233" y3="-2.29480696" z3="1.13350699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4926855" y3="-3.22407782" z3="-2.0668481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3527579" y3="-5.29573276" z3="-1.29805663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26125701" y3="-5.69930215" z3="1.10958838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74016766" y3="-3.53269984" z3="2.57859794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87373373" y3="-1.4469464" z3="1.81337737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49137695" y3="4.02121585" z3="0.04419045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86237333" y3="3.80971718" z3="-0.01717436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40286707" y3="3.28848831" z3="-1.1875937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61406892" y3="3.00331149" z3="-2.29930187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24345319" y3="3.2131882" z3="-2.21855227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04446655" y3="4.38611059" z3="0.97216255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50959172" y3="4.02094542" z3="0.83461786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83869613" y3="3.00253778" z3="-1.24197988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07537876" y3="2.60800843" z3="-3.20509264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38861112" y3="2.96594985" z3="-3.07304493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16822506" y3="-5.91088621" z3="2.29774288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76746209" y3="-6.40184003" z3="0.24643964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3244767" y3="2.73037738" z3="-2.31856385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46360014" y3="3.03587658" z3="-0.1983825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62232499" y3="0.16400692" z3="-2.02684918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94664677" y3="1.41100177" z3="-1.88752526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80204815" y3="0.09279662" z3="-2.81817762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27906123" y3="1.20036394" z3="-3.47412524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31735166" y3="-0.86870832" z3="-2.90526843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18400088" y3="1.13334884" z3="-4.08438733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44904602" y3="2.53189121" z3="-2.60628625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58337508" y3="2.42937561" z3="-3.37527668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91767908" y3="3.48406528" z3="-2.54958406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94812108" y3="3.30409448" z3="-3.92112125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57835342" y3="3.90560212" z3="-0.25221933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76001444" y3="5.05683691" z3="-0.05827607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92807887" y3="3.95899424" z3="0.19669738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44575846" y3="5.1043736" z3="0.75225705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55748002" y3="3.07207062" z3="0.10244296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48564823" y3="5.11931754" z3="1.09064334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32835909" y3="6.23204824" z3="0.50649786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64391779" y3="6.26187635" z3="0.8974496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69092698" y3="7.1121556" z3="0.63548836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06962725" y3="7.16943175" z3="1.33442002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35198034" y3="-3.93519427" z3="-2.87112236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53481886" y3="-4.9702803" z3="-2.54465708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22464126" y3="-3.6114619" z3="-3.46961318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47707897" y3="-3.9303781" z3="-3.54042295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69455953" y3="-1.59966115" z3="-2.09460782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43051844" y3="-1.12625162" z3="-2.7696713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53026561" y3="-0.93646428" z3="-1.23084472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74510066" y3="-1.6441179" z3="-2.65166743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.917,-.9551,-.6845;6.5998,-1.9507,-1.5525;6.0823,-.9964,-1.4145;4.7732,1.477,-1.0673;4.286,.3107,-.5027;2.6539,2.7379,-1.1536;4.0037,2.7352,-.8492;2.3785,4.9948,-.3768;1.8073,3.8529,-.8872;1.7527,5.8708,-.1788;2.0876,1.6122,-1.6778;3.1268,.358,.2166;1.7117,.3843,-.6388;.6087,.7339,.2908;1.6603,-.8563,-1.5026;1.0944,-2.4745,-1.3214;2.0294,-5.4943,-6.2703;1.761,-5.0591,-5.3034;1.0573,-3.9168,-2.8485;1.7276,-3.6786,-5.1571;1.4711,-5.8851,-4.2145;1.1338,-5.3078,-2.9968;1.3848,-3.0756,-3.9363;1.9607,-3.0118,-5.9909;1.5216,-6.9729,-4.3074;.9455,-5.9405,-2.1252;.6534,-3.3677,-1.6046;-.3454,-3.8514,-.8575;-.688,-4.8542,-1.1255;-.38,-3.5481,.5907;-.4108,-3.0703,3.3488;-.6859,-4.5823,1.4839;-.1096,-2.2702,1.0898;-.1217,-2.0336,2.4601;-.6928,-4.3454,2.8573;-.8772,-5.5903,1.105;.0978,-1.4309,.4251;.1046,-1.0255,2.8175;-.8971,-5.1693,3.5464;-.4095,-2.8883,4.4275;1.338,-1.7398,-3.9075;1.4693,-1.3334,-3.0051;.3368,3.7127,-1.0435;-2.1331,-2.9867,-1.7093;-2.9191,-3.1617,-.5663;-3.1103,-2.2849,.3645;-3.8356,-.7182,.6192;-4.6988,-.2486,-.9666;-2.5262,.4548,1.2087;-5.0783,-1.0564,1.9768;-3.4036,-4.372,-.3288;-4.1199,-4.6088,.8738;-4.0011,.0529,-1.7633;-5.365,.6127,-.778;-5.3193,-1.0801,-1.347;-1.6362,.5559,.5607;-2.1652,.1486,2.206;-2.9928,1.4524,1.3081;-5.5399,-.1082,2.307;-5.8907,-1.7245,1.6407;-4.5888,-1.5166,2.8533;-5.0562,-4.0273,.8895;-3.5082,-4.3519,1.7524;-4.3501,-5.6827,.8711;4.2791,-2.1971,-.1752;4.1366,-3.2952,-1.0358;3.4937,-4.4545,-.6186;2.9979,-4.5105,.6785;3.1461,-3.4515,1.5692;3.7801,-2.2948,1.1335;4.4927,-3.2241,-2.0668;3.3528,-5.2957,-1.2981;2.2613,-5.6993,1.1096;2.7402,-3.5327,2.5786;3.8737,-1.4469,1.8134;-.4914,4.0212,.0442;-1.8624,3.8097,-.0172;-2.4029,3.2885,-1.1876;-1.6141,3.0033,-2.2993;-.2435,3.2132,-2.2186;-.0445,4.3861,.9722;-2.5096,4.0209,.8346;-3.8387,3.0025,-1.242;-2.0754,2.608,-3.2051;.3886,2.9659,-3.073;2.1682,-5.9109,2.2977;1.7675,-6.4018,.2464;-4.3245,2.7304,-2.3186;-4.4636,3.0359,-.1984;6.6223,.164,-2.0268;5.9466,1.411,-1.8875;7.802,.0928,-2.8182;8.2791,1.2004,-3.4741;8.3174,-.8687,-2.9053;9.184,1.1333,-4.0844;6.449,2.5319,-2.6063;7.5834,2.4294,-3.3753;5.9177,3.4841,-2.5496;7.9481,3.3041,-3.9211;4.5784,3.9056,-.2522;3.76,5.0568,-.0583;5.9281,3.959,.1967;6.4458,5.1044,.7523;6.5575,3.0721,.1024;7.4856,5.1193,1.0906;4.3284,6.232,.5065;5.6439,6.2619,.8974;3.6909,7.1122,.6355;6.0696,7.1694,1.3344;-2.352,-3.9352,-2.8711;-2.5348,-4.9703,-2.5447;-3.2246,-3.6115,-3.4696;-1.4771,-3.9304,-3.5404;-1.6946,-1.5997,-2.0946;-2.4305,-1.1263,-2.7697;-1.5303,-.9365,-1.2308;-.7451,-1.6441,-2.6517;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931923733</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000475339711 0.000070512246 0.021398688404 0.005305232473</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057131236 -0.000108717 0.000065385 0.000148585 0.000253961 0.000362250 0.000396033 0.000575569 0.000723401 0.000778600 0.000928256 0.001016724 0.001194680 0.001259441 0.001388496 0.001502690 0.001625799 0.001733807 0.001778342 0.002080983 0.002299085 0.002584283 0.002810366 0.003043635 0.003315943 0.003667161 0.003936815 0.004514582 0.004769587 0.004898418 0.005172706 0.005338385 0.006002922 0.006381466 0.006482035 0.006870145 0.006938618 0.007407341 0.008191934 0.008659387 0.008814908 0.009401276 0.009755069 0.009875528 0.010962945 0.011185779 0.011879208 0.012634448 0.013381390 0.013654774 0.013997844 0.014628742 0.014865587 0.015420379 0.015902373 0.016079731 0.016711710 0.018644005 0.019256635 0.019432851 0.020202932 0.020539707 0.021545662 0.021752952 0.022428054 0.022807581 0.023491663 0.023801126 0.024537055 0.025902860 0.026573582 0.026929133 0.027137062 0.027468270 0.028351267 0.028835931 0.029907622 0.031024844 0.031581471 0.034232055 0.034802040 0.036032408 0.039068002 0.039561114 0.041999735 0.045430019 0.046141576 0.046732376 0.048851826 0.049700497 0.050088634 0.050838802 0.051549272 0.052199385 0.052289549 0.052416464 0.053021039 0.053642404 0.055002351 0.056107396 0.056448232 0.056724356 0.057014933 0.057096747 0.057796766 0.058626327 0.059269805 0.059780926 0.061351929 0.062159964 0.062940499 0.064337501 0.064586455 0.065112690 0.066040563 0.067575793 0.067837259 0.069020529 0.070514134 0.071537550 0.072230693 0.072650155 0.072971162 0.073078057 0.078684414 0.080493828 0.081936100 0.082666303 0.083547777 0.084587022 0.089045700 0.089447330 0.089828919 0.091341678 0.093335146 0.094582596 0.095501737 0.096298149 0.096869949 0.098572703 0.100191554 0.100704899 0.102804695 0.103994450 0.104675000 0.106913905 0.109295691 0.111084609 0.112356879 0.112880396 0.114014118 0.114814738 0.117022692 0.117442589 0.118639023 0.119192611 0.120687925 0.122239486 0.125098640 0.125865787 0.128608052 0.129063228 0.131075773 0.133870459 0.136775643 0.137862378 0.138612076 0.139690897 0.140416920 0.143429015 0.144578498 0.145900871 0.146814534 0.152009998 0.153606798 0.154131918 0.159659570 0.160849311 0.168575848 0.171464855 0.176289753 0.179133412 0.181641368 0.184536987 0.189169065 0.190468501 0.191991885 0.201374100 0.202244367 0.206338166 0.206967807 0.207269705 0.212485037 0.212640891 0.215633869 0.217026558 0.220428852 0.220938620 0.224620938 0.225150467 0.227167833 0.231908595 0.234608706 0.236201298 0.238588282 0.246307596 0.248444798 0.252698967 0.256565919 0.257232906 0.258335188 0.262573344 0.271584812 0.282929424 0.292040279 0.300139721 0.300247650 0.301115940 0.307160743 0.307798221 0.309856393 0.319974409 0.321381619 0.326466558 0.330923717 0.336687713 0.347767838 0.352029853 0.355651452 0.360831980 0.362111915 0.364155365 0.384571974 0.407250464 0.414450670 0.430301379 0.431728008 0.435404072 0.451157510 0.464781373 0.475681147 0.478915932 0.480504979 0.486537448 0.498906991 0.503877158 0.515206322 0.518043042 0.543852465 0.566942785 0.567739018 0.586813015 0.591812145 0.605889917 0.644289773 0.645555829 0.668097334 0.675612613 0.687423528 0.703743331 0.704134463 0.704401710 0.711241530 0.717277255 0.734304743 0.738033871 0.739757213 0.747114675 0.750856927 0.771618273 0.775990854 0.809257462 0.821857733 0.824164918 0.828944459 0.834307937 0.848291323 0.849564767 0.851427711 0.854658494 0.863523016 0.867476780 0.875948413 0.887590725 0.891370419 0.892337085 0.893703184 0.902130092 0.910399350 0.918004432 0.922680013 0.924569588 0.932024607 0.936045178 0.956125039 0.962730168 0.965371577 0.970108864 0.977289508 0.982583262 0.998667354 1.013018141 1.016307557 1.021938769 1.040263409 1.055135366 1.071312728 1.073121960 1.079994653 1.087458880 1.108548420 1.110440431 1.118313730 1.119259294 1.122636617 1.123988592 1.141900767 1.149900834 1.161775406 1.170199334 1.177329254 1.188811602 1.200787861 1.222181429 1.234221379 1.258245496 1.296508402 1.298812490 1.314752078 1.326483415 1.327513574 1.330255869 1.331447233 1.334824005 1.342478284 1.349222479 1.368982468 1.380016383 1.381343254 1.381888891 1.429540994 1.513021216 1.557991264 1.684848197 1.922877082</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">292</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9188317" y3="-0.95454027" z3="-0.68223689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60382088" y3="-1.95048355" z3="-1.54543198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08611638" y3="-0.99607198" z3="-1.40898057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77602563" y3="1.47750417" z3="-1.06577556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28742581" y3="0.3112387" z3="-0.50217373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6566262" y3="2.73799839" z3="-1.15747005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00583166" y3="2.73573161" z3="-0.85009984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37947248" y3="4.99570179" z3="-0.38402924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8093979" y3="3.8531345" z3="-0.89397073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75344152" y3="5.87171075" z3="-0.18991472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09152973" y3="1.61204926" z3="-1.68231897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12662357" y3="0.35831024" z3="0.21455627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71332145" y3="0.38444135" z3="-0.64383266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60838491" y3="0.73443679" z3="0.28351214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66355626" y3="-0.85630071" z3="-1.50744955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09341044" y3="-2.47280472" z3="-1.32468906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01450005" y3="-5.49239597" z3="-6.27675205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74920824" y3="-5.05730281" z3="-5.30894375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05308691" y3="-3.91510604" z3="-2.85165359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7161594" y3="-3.6767555" z3="-5.16250506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46304582" y3="-5.88327716" z3="-4.21909862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12946182" y3="-5.30608065" z3="-3.00024426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37715121" y3="-3.07392036" z3="-3.94061409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94643331" y3="-3.00997006" z3="-5.99711028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51325579" y3="-6.97102804" z3="-4.31222716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94373329" y3="-5.9386526" z3="-2.12804867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65185271" y3="-3.36642129" z3="-1.60670371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3470773" y3="-3.84854284" z3="-0.85926137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69009897" y3="-4.85151547" z3="-1.12667258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38027173" y3="-3.54557792" z3="0.58908693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41035113" y3="-3.06766996" z3="3.34716539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68653298" y3="-4.57955053" z3="1.48246562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10818674" y3="-2.26833449" z3="1.08820866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12012594" y3="-2.03150504" z3="2.45836262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69295285" y3="-4.34279388" z3="2.85586722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87779581" y3="-5.58833217" z3="1.1041603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09953174" y3="-1.42901755" z3="0.4233348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10661208" y3="-1.02325428" z3="2.81569819">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89829342" y3="-5.16634266" z3="3.54462925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40891881" y3="-2.88548889" z3="4.4257637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32986255" y3="-1.73804861" z3="-3.91154334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46537508" y3="-1.33198311" z3="-3.00959823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33908317" y3="3.71187331" z3="-1.051491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13424407" y3="-2.98365441" z3="-1.70849298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.9197646" y3="-3.16194313" z3="-0.56539972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11016826" y3="-2.288953" z3="0.36859006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83655977" y3="-0.72288657" z3="0.62691274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70931133" y3="-0.25662974" z3="-0.95480683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52676653" y3="0.45432158" z3="1.20811866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06988916" y3="-1.06253294" z3="1.99253538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40320267" y3="-4.37343778" z3="-0.33089209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11978618" y3="-4.61386635" z3="0.87077118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01600622" y3="0.03977258" z3="-1.75736258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37116098" y3="0.6077244" z3="-0.76476108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33518515" y3="-1.08751286" z3="-1.32762872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63886542" y3="0.55413849" z3="0.55750514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16284382" y3="0.15285285" z3="2.20598944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99473987" y3="1.45140585" z3="1.30501222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5327207" y3="-0.11531778" z3="2.32425141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88210188" y3="-1.7337676" z3="1.66212114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57370649" y3="-1.5200536" z3="2.86680544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05721997" y3="-4.03394616" z3="0.88660691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50920168" y3="-4.35728192" z3="1.75042848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34822141" y3="-5.68780356" z3="0.86515575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27959213" y3="-2.19643723" z3="-0.17413218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13585575" y3="-3.293443" z3="-1.03587305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49175027" y3="-4.45242731" z3="-0.61965255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99680686" y3="-4.50962902" z3="0.67770364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14607437" y3="-3.45148625" z3="1.56936015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78056546" y3="-2.29465823" z3="1.13442937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49160262" y3="-3.22129859" z3="-2.06689552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34871779" y3="-5.29197453" z3="-1.30015428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25948027" y3="-5.69833446" z3="1.10801001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74018578" y3="-3.53328783" z3="2.57871406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87430829" y3="-1.44672221" z3="1.81470112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48980988" y3="4.02174177" z3="0.03517954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86058764" y3="3.80827322" z3="-0.02581343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40019757" y3="3.28371817" z3="-1.19527527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61076312" y3="2.99751559" z3="-2.30636273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24028733" y3="3.20945463" z3="-2.2257421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04349584" y3="4.38890416" z3="0.96262122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50822193" y3="4.02029212" z3="0.82553547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83555122" y3="2.99493102" z3="-1.24892588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07137858" y3="2.5994374" z3="-3.21130509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39227823" y3="2.96133329" z3="-3.07953097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16589994" y3="-5.91037052" z3="2.29595824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76566588" y3="-6.40033169" z3="0.24443355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32021711" y3="2.71596355" z3="-2.32436098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46125359" y3="3.03304002" z3="-0.20603684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62807521" y3="0.16435334" z3="-2.01961648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95193401" y3="1.41134551" z3="-1.88249531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81047777" y3="0.09318428" z3="-2.80688736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28983288" y3="1.20082417" z3="-3.46102451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32609044" y3="-0.86831584" z3="-2.89219253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19696544" y3="1.13389629" z3="-4.06798678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45672646" y3="2.53220684" z3="-2.59966448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59375972" y3="2.42979699" z3="-3.3646016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.925203" y3="3.48438362" z3="-2.54484807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96040957" y3="3.30460067" z3="-3.90905736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57891565" y3="3.90676029" z3="-0.25285823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76016342" y3="5.05826657" z3="-0.06227201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92757627" y3="3.96056784" z3="0.19932078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44395154" y3="5.106494" z3="0.75496086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55722009" y3="3.07351119" z3="0.10730446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48303507" y3="5.1217028" z3="1.09592509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32717326" y3="6.23408166" z3="0.50265815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64174024" y3="6.26422149" z3="0.89698772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68940916" y3="7.11445046" z3="0.62943393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0663611" y3="7.17222239" z3="1.33415336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35321868" y3="-3.93015812" z3="-2.87245178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53377944" y3="-4.96645226" z3="-2.54763953">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22667397" y3="-3.60597291" z3="-3.46900485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47922296" y3="-3.92305728" z3="-3.5429563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.6973319" y3="-1.59531457" z3="-2.09051745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43423353" y3="-1.12111553" z3="-2.76350858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53311576" y3="-0.93413508" z3="-1.22526925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74769844" y3="-1.63757653" z3="-2.64794637">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9188,-.9545,-.6822;6.6038,-1.9505,-1.5454;6.0861,-.9961,-1.409;4.776,1.4775,-1.0658;4.2874,.3112,-.5022;2.6566,2.738,-1.1575;4.0058,2.7357,-.8501;2.3795,4.9957,-.384;1.8094,3.8531,-.894;1.7534,5.8717,-.1899;2.0915,1.612,-1.6823;3.1266,.3583,.2146;1.7133,.3844,-.6438;.6084,.7344,.2835;1.6636,-.8563,-1.5074;1.0934,-2.4728,-1.3247;2.0145,-5.4924,-6.2768;1.7492,-5.0573,-5.3089;1.0531,-3.9151,-2.8517;1.7162,-3.6768,-5.1625;1.463,-5.8833,-4.2191;1.1295,-5.3061,-3.0002;1.3772,-3.0739,-3.9406;1.9464,-3.01,-5.9971;1.5133,-6.971,-4.3122;.9437,-5.9387,-2.128;.6519,-3.3664,-1.6067;-.3471,-3.8485,-.8593;-.6901,-4.8515,-1.1267;-.3803,-3.5456,.5891;-.4104,-3.0677,3.3472;-.6865,-4.5796,1.4825;-.1082,-2.2683,1.0882;-.1201,-2.0315,2.4584;-.693,-4.3428,2.8559;-.8778,-5.5883,1.1042;.0995,-1.429,.4233;.1066,-1.0233,2.8157;-.8983,-5.1663,3.5446;-.4089,-2.8855,4.4258;1.3299,-1.738,-3.9115;1.4654,-1.332,-3.0096;.3391,3.7119,-1.0515;-2.1342,-2.9837,-1.7085;-2.9198,-3.1619,-.5654;-3.1102,-2.289,.3686;-3.8366,-.7229,.6269;-4.7093,-.2566,-.9548;-2.5268,.4543,1.2081;-5.0699,-1.0625,1.9925;-3.4032,-4.3734,-.3309;-4.1198,-4.6139,.8708;-4.016,.0398,-1.7574;-5.3712,.6077,-.7648;-5.3352,-1.0875,-1.3276;-1.6389,.5541,.5575;-2.1628,.1529,2.206;-2.9947,1.4514,1.305;-5.5327,-.1153,2.3243;-5.8821,-1.7338,1.6621;-4.5737,-1.5201,2.8668;-5.0572,-4.0339,.8866;-3.5092,-4.3573,1.7504;-4.3482,-5.6878,.8652;4.2796,-2.1964,-.1741;4.1359,-3.2934,-1.0359;3.4918,-4.4524,-.6197;2.9968,-4.5096,.6777;3.1461,-3.4515,1.5694;3.7806,-2.2947,1.1344;4.4916,-3.2213,-2.0669;3.3487,-5.292,-1.3002;2.2595,-5.6983,1.108;2.7402,-3.5333,2.5787;3.8743,-1.4467,1.8147;-.4898,4.0217,.0352;-1.8606,3.8083,-.0258;-2.4002,3.2837,-1.1953;-1.6108,2.9975,-2.3064;-.2403,3.2095,-2.2257;-.0435,4.3889,.9626;-2.5082,4.0203,.8255;-3.8356,2.9949,-1.2489;-2.0714,2.5994,-3.2113;.3923,2.9613,-3.0795;2.1659,-5.9104,2.296;1.7657,-6.4003,.2444;-4.3202,2.716,-2.3244;-4.4613,3.033,-.206;6.6281,.1644,-2.0196;5.9519,1.4113,-1.8825;7.8105,.0932,-2.8069;8.2898,1.2008,-3.461;8.3261,-.8683,-2.8922;9.197,1.1339,-4.068;6.4567,2.5322,-2.5997;7.5938,2.4298,-3.3646;5.9252,3.4844,-2.5448;7.9604,3.3046,-3.9091;4.5789,3.9068,-.2529;3.7602,5.0583,-.0623;5.9276,3.9606,.1993;6.444,5.1065,.755;6.5572,3.0735,.1073;7.483,5.1217,1.0959;4.3272,6.2341,.5027;5.6417,6.2642,.897;3.6894,7.1145,.6294;6.0664,7.1722,1.3342;-2.3532,-3.9302,-2.8725;-2.5338,-4.9665,-2.5476;-3.2267,-3.606,-3.469;-1.4792,-3.9231,-3.543;-1.6973,-1.5953,-2.0905;-2.4342,-1.1211,-2.7635;-1.5331,-.9341,-1.2253;-.7477,-1.6376,-2.6479;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930629489</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000782874574 0.000116018357 0.024248031399 0.005192314486</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057132309 -0.000053242 0.000048137 0.000158610 0.000211486 0.000359599 0.000399735 0.000576238 0.000721266 0.000778341 0.000929972 0.001016996 0.001191504 0.001256102 0.001385634 0.001501958 0.001622651 0.001726583 0.001775873 0.002078305 0.002301880 0.002585076 0.002811183 0.003043818 0.003314834 0.003668450 0.003932340 0.004513972 0.004767331 0.004897626 0.005170468 0.005336457 0.006001846 0.006365544 0.006488941 0.006838934 0.006933009 0.007397685 0.008191712 0.008658321 0.008814855 0.009399746 0.009755646 0.009875463 0.010962282 0.011188181 0.011880392 0.012633817 0.013381064 0.013663173 0.013995021 0.014628986 0.014866418 0.015419890 0.015901471 0.016037295 0.016714032 0.018643594 0.019259020 0.019433426 0.020204833 0.020542497 0.021545853 0.021752004 0.022426988 0.022807866 0.023491610 0.023801094 0.024538388 0.025902918 0.026573894 0.026933050 0.027136856 0.027468925 0.028352506 0.028824847 0.029848998 0.031026423 0.031581280 0.034233155 0.034803227 0.036032566 0.039068456 0.039566327 0.041999775 0.045430208 0.046134058 0.046732251 0.048853507 0.049700270 0.050089196 0.050838643 0.051549574 0.052199216 0.052289595 0.052416553 0.053021448 0.053642621 0.055002525 0.056108450 0.056448271 0.056724438 0.057015581 0.057093785 0.057796914 0.058626310 0.059271062 0.059781411 0.061351723 0.062162352 0.062941823 0.064338527 0.064585968 0.065113870 0.066040532 0.067574765 0.067832633 0.069020686 0.070509274 0.071529406 0.072235132 0.072645365 0.072969197 0.073068854 0.078674817 0.080464700 0.081929566 0.082612413 0.083533097 0.084594261 0.089052064 0.089448407 0.089828583 0.091342931 0.093335334 0.094582702 0.095501841 0.096299241 0.096870319 0.098573183 0.100192378 0.100704951 0.102805423 0.103994933 0.104678172 0.106917659 0.109299477 0.111088647 0.112364515 0.112881827 0.114016005 0.114813968 0.117023193 0.117443481 0.118639082 0.119193507 0.120688861 0.122238870 0.125096748 0.125865257 0.128611665 0.129063691 0.131077586 0.133871727 0.136788052 0.137864174 0.138612102 0.139694934 0.140414445 0.143429666 0.144578363 0.145898153 0.146814538 0.152010052 0.153607880 0.154130661 0.159645757 0.160848493 0.168575021 0.171464968 0.176302161 0.179136729 0.181641953 0.184537637 0.189169968 0.190483136 0.191992230 0.201375386 0.202245207 0.206340127 0.206967988 0.207269731 0.212487782 0.212644856 0.215634612 0.217024102 0.220429477 0.220938116 0.224621755 0.225151252 0.227169621 0.231909802 0.234608779 0.236204124 0.238588500 0.246308071 0.248445779 0.252703314 0.256566320 0.257232998 0.258335172 0.262572908 0.271585247 0.282929373 0.292040378 0.300139809 0.300251325 0.301116817 0.307162667 0.307798444 0.309856629 0.319974536 0.321382362 0.326466589 0.330926174 0.336688148 0.347767258 0.352029901 0.355651229 0.360830983 0.362112166 0.364155456 0.384573079 0.407254695 0.414450301 0.430302911 0.431720959 0.435405453 0.451158524 0.464782374 0.475679708 0.478918895 0.480505902 0.486533207 0.498907053 0.503875681 0.515206912 0.518043515 0.543855810 0.566942826 0.567739028 0.586814647 0.591808541 0.605890400 0.644289915 0.645558357 0.668097783 0.675612625 0.687423582 0.703731832 0.704133185 0.704401672 0.711249570 0.717277411 0.734303590 0.738033893 0.739759390 0.747105634 0.750857317 0.771618417 0.775990984 0.809262564 0.821857893 0.824166054 0.828944444 0.834308605 0.848296969 0.849565742 0.851427310 0.854658576 0.863524101 0.867476835 0.875949197 0.887592486 0.891372390 0.892329295 0.893706582 0.902129237 0.910404721 0.918004114 0.922662237 0.924569198 0.932024711 0.936047610 0.956124709 0.962727051 0.965372742 0.970109424 0.977285597 0.982583193 0.998667735 1.013020914 1.016307844 1.021939334 1.040264800 1.055136183 1.071313943 1.073122936 1.080003210 1.087461066 1.108548373 1.110440488 1.118314707 1.119260635 1.122636647 1.123988985 1.141900856 1.149907457 1.161775676 1.170199474 1.177331675 1.188820168 1.200788433 1.222182276 1.234221863 1.258246183 1.296508620 1.298826799 1.314752220 1.326483547 1.327513436 1.330255917 1.331447788 1.334824214 1.342478419 1.349224220 1.368992163 1.380016416 1.381343277 1.381888365 1.429540802 1.512994881 1.557990987 1.684848642 1.922874908</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">293</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92089746" y3="-0.95401992" z3="-0.68256683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60841594" y3="-1.94855639" z3="-1.54245924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08996493" y3="-0.99447157" z3="-1.40647424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7776378" y3="1.47817045" z3="-1.06439849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2881769" y3="0.31115362" z3="-0.50319052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65785137" y3="2.73768355" z3="-1.16038291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00624947" y3="2.7357469" z3="-0.84943023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37740466" y3="4.99404891" z3="-0.38384901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80908298" y3="3.85191511" z3="-0.89692119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75010046" y3="5.86968153" z3="-0.18766748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0949834" y3="1.61196959" z3="-1.68817064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12533752" y3="0.35672338" z3="0.21031441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71440353" y3="0.38316063" z3="-0.65197188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60700143" y3="0.73255509" z3="0.27271675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66727185" y3="-0.85712798" z3="-1.51635435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09414974" y3="-2.47360231" z3="-1.32888759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99025202" y3="-5.49886924" z3="-6.28295829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73062619" y3="-5.062385" z3="-5.31423648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04767711" y3="-3.9167522" z3="-2.85508599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69907972" y3="-3.68156145" z3="-5.16945806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45020442" y3="-5.88689421" z3="-4.22176467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12310973" y3="-5.30798383" z3="-3.00197107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36692712" y3="-3.07705655" z3="-3.94654071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92511539" y3="-3.01598149" z3="-6.00619748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49957677" y3="-6.97482264" z3="-4.31369243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94139011" y3="-5.93929486" z3="-2.12800475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65044295" y3="-3.36611659" z3="-1.60970785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34643082" y3="-3.84838385" z3="-0.85897217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69046706" y3="-4.85130495" z3="-1.12494336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.376871" y3="-3.54378632" z3="0.58909919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40182552" y3="-3.06287512" z3="3.34680152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68154744" y3="-4.57677384" z3="1.48402022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10468183" y3="-2.26545762" z3="1.08626671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11386742" y3="-2.02733779" z3="2.45635454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6854791" y3="-4.33838726" z3="2.85722424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87444813" y3="-5.58492813" z3="1.10650345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10152487" y3="-1.42673108" z3="0.42048009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11349745" y3="-1.01890623" z3="2.81237266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88886722" y3="-5.16143512" z3="3.54769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39830806" y3="-2.87961142" z3="4.42528539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32063827" y3="-1.74115399" z3="-3.9184922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46056788" y3="-1.33457816" z3="-3.01752305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33912067" y3="3.71011268" z3="-1.05688792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13587696" y3="-2.98372828" z3="-1.70608715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91900842" y3="-3.16174223" z3="-0.56155013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10883962" y3="-2.28727084" z3="0.37177338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8345787" y3="-0.72159045" z3="0.62965986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71086693" y3="-0.25786994" z3="-0.95056547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52402209" y3="0.45700243" z3="1.20603274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06524268" y3="-1.06000843" z3="1.99814265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40200587" y3="-4.37293049" z3="-0.32591586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11644355" y3="-4.61286328" z3="0.87713025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01904613" y3="0.03623071" z3="-1.75532696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37162918" y3="0.60747036" z3="-0.76121617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33814407" y3="-1.08917799" z3="-1.3203686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63553602" y3="0.55363603" z3="0.55527789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16063967" y3="0.15952565" z3="2.20504074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99114424" y3="1.45507652" z3="1.29814862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52813704" y3="-0.11261897" z3="2.32852824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87741397" y3="-1.73275254" z3="1.6709626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56708845" y3="-1.51502599" z3="2.87252226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0540017" y3="-4.03348585" z3="0.89463144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50458743" y3="-4.35601651" z3="1.75549421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34429067" y3="-5.6872575" z3="0.87316625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2810364" y3="-2.19622348" z3="-0.17614914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.1361423" y3="-3.29195024" z3="-1.03927457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49165422" y3="-4.45107406" z3="-0.62410617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99750572" y3="-4.50932043" z3="0.67355307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14789234" y3="-3.4524767" z3="1.56647949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78279232" y3="-2.29573049" z3="1.13258529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49177157" y3="-3.21888831" z3="-2.07031463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34870764" y3="-5.29074821" z3="-1.30531061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26090412" y3="-5.69866186" z3="1.10333501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74293757" y3="-3.53550177" z3="2.57610604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87827973" y3="-1.44940781" z3="1.81405739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49189624" y3="4.02151822" z3="0.02781275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86232588" y3="3.80754626" z3="-0.03559755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39944493" y3="3.28041746" z3="-1.20494129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60788666" y3="2.99258875" z3="-2.31396935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23789096" y3="3.20556614" z3="-2.23136563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04762478" y3="4.39048341" z3="0.95544356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51160732" y3="4.0209372" z3="0.81404582">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83445482" y3="2.99062353" z3="-1.26052861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06651544" y3="2.59259306" z3="-3.21906571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39627558" y3="2.95631669" z3="-3.08374929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16909592" y3="-5.91235656" z3="2.29121703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76595496" y3="-6.39956486" z3="0.23955439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31705342" y3="2.70862832" z3="-2.33608308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46191239" y3="3.03095519" z3="-0.21872832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63296848" y3="0.16684162" z3="-2.01456469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95586282" y3="1.41337748" z3="-1.87793401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8176224" y3="0.09708274" z3="-2.79865363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29833956" y3="1.20563066" z3="-3.45022785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33396923" y3="-0.86404546" z3="-2.8835374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20726743" y3="1.13978763" z3="-4.05470143">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46214375" y3="2.53520956" z3="-2.59249892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60140756" y3="2.43414098" z3="-3.35440826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93000317" y3="3.48706128" z3="-2.53815401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96920778" y3="3.30966988" z3="-3.89688466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57729018" y3="3.90613537" z3="-0.2489704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75740657" y3="5.05689317" z3="-0.05893984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92451543" y3="3.95997952" z3="0.20735313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43859957" y3="5.1053397" z3="0.76623456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55480328" y3="3.07340917" z3="0.11625352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47654824" y3="5.1205842" z3="1.110484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32214718" y3="6.23219826" z3="0.50918289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63550808" y3="6.26246317" z3="0.90736918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68358164" y3="7.11192461" z3="0.63498385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05839759" y3="7.17001394" z3="1.34702179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3571393" y3="-3.93015054" z3="-2.86913495">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53521899" y3="-4.96661673" z3="-2.5446398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2336793" y3="-3.60777458" z3="-3.46285063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48532568" y3="-3.92093699" z3="-3.54235984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69898216" y3="-1.59572684" z3="-2.09019699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43605471" y3="-1.12187137" z3="-2.76387821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53386194" y3="-0.93337916" z3="-1.22601191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75034529" y3="-1.63922098" z3="-2.6488295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9209,-.954,-.6826;6.6084,-1.9486,-1.5425;6.09,-.9945,-1.4065;4.7776,1.4782,-1.0644;4.2882,.3112,-.5032;2.6579,2.7377,-1.1604;4.0062,2.7357,-.8494;2.3774,4.994,-.3838;1.8091,3.8519,-.8969;1.7501,5.8697,-.1877;2.095,1.612,-1.6882;3.1253,.3567,.2103;1.7144,.3832,-.652;.607,.7326,.2727;1.6673,-.8571,-1.5164;1.0941,-2.4736,-1.3289;1.9903,-5.4989,-6.283;1.7306,-5.0624,-5.3142;1.0477,-3.9168,-2.8551;1.6991,-3.6816,-5.1695;1.4502,-5.8869,-4.2218;1.1231,-5.308,-3.002;1.3669,-3.0771,-3.9465;1.9251,-3.016,-6.0062;1.4996,-6.9748,-4.3137;.9414,-5.9393,-2.128;.6504,-3.3661,-1.6097;-.3464,-3.8484,-.859;-.6905,-4.8513,-1.1249;-.3769,-3.5438,.5891;-.4018,-3.0629,3.3468;-.6815,-4.5768,1.484;-.1047,-2.2655,1.0863;-.1139,-2.0273,2.4564;-.6855,-4.3384,2.8572;-.8744,-5.5849,1.1065;.1015,-1.4267,.4205;.1135,-1.0189,2.8124;-.8889,-5.1614,3.5477;-.3983,-2.8796,4.4253;1.3206,-1.7412,-3.9185;1.4606,-1.3346,-3.0175;.3391,3.7101,-1.0569;-2.1359,-2.9837,-1.7061;-2.919,-3.1617,-.5616;-3.1088,-2.2873,.3718;-3.8346,-.7216,.6297;-4.7109,-.2579,-.9506;-2.524,.457,1.206;-5.0652,-1.06,1.9981;-3.402,-4.3729,-.3259;-4.1164,-4.6129,.8771;-4.019,.0362,-1.7553;-5.3716,.6075,-.7612;-5.3381,-1.0892,-1.3204;-1.6355,.5536,.5553;-2.1606,.1595,2.205;-2.9911,1.4551,1.2981;-5.5281,-.1126,2.3285;-5.8774,-1.7328,1.671;-4.5671,-1.515,2.8725;-5.054,-4.0335,.8946;-3.5046,-4.356,1.7555;-4.3443,-5.6873,.8732;4.281,-2.1962,-.1761;4.1361,-3.292,-1.0393;3.4917,-4.4511,-.6241;2.9975,-4.5093,.6736;3.1479,-3.4525,1.5665;3.7828,-2.2957,1.1326;4.4918,-3.2189,-2.0703;3.3487,-5.2907,-1.3053;2.2609,-5.6987,1.1033;2.7429,-3.5355,2.5761;3.8783,-1.4494,1.8141;-.4919,4.0215,.0278;-1.8623,3.8075,-.0356;-2.3994,3.2804,-1.2049;-1.6079,2.9926,-2.314;-.2379,3.2056,-2.2314;-.0476,4.3905,.9554;-2.5116,4.0209,.814;-3.8345,2.9906,-1.2605;-2.0665,2.5926,-3.2191;.3963,2.9563,-3.0837;2.1691,-5.9124,2.2912;1.766,-6.3996,.2396;-4.3171,2.7086,-2.3361;-4.4619,3.031,-.2187;6.633,.1668,-2.0146;5.9559,1.4134,-1.8779;7.8176,.0971,-2.7987;8.2983,1.2056,-3.4502;8.334,-.864,-2.8835;9.2073,1.1398,-4.0547;6.4621,2.5352,-2.5925;7.6014,2.4341,-3.3544;5.93,3.4871,-2.5382;7.9692,3.3097,-3.8969;4.5773,3.9061,-.249;3.7574,5.0569,-.0589;5.9245,3.96,.2074;6.4386,5.1053,.7662;6.5548,3.0734,.1163;7.4765,5.1206,1.1105;4.3221,6.2322,.5092;5.6355,6.2625,.9074;3.6836,7.1119,.635;6.0584,7.17,1.347;-2.3571,-3.9302,-2.8691;-2.5352,-4.9666,-2.5446;-3.2337,-3.6078,-3.4629;-1.4853,-3.9209,-3.5424;-1.699,-1.5957,-2.0902;-2.4361,-1.1219,-2.7639;-1.5339,-.9334,-1.226;-.7503,-1.6392,-2.6488;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928966873</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000684264604 0.000109658867 0.027584140527 0.005291232476</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057133345 -0.000054247 0.000022305 0.000102056 0.000257593 0.000364414 0.000400873 0.000577357 0.000721105 0.000779103 0.000930699 0.001017868 0.001191848 0.001258010 0.001385492 0.001501881 0.001621158 0.001724377 0.001775745 0.002077813 0.002304067 0.002585497 0.002811102 0.003043923 0.003315017 0.003668679 0.003932970 0.004515930 0.004764694 0.004897897 0.005170996 0.005334456 0.006001862 0.006366571 0.006492417 0.006838429 0.006934903 0.007397877 0.008191776 0.008659456 0.008814941 0.009399581 0.009756401 0.009875607 0.010962122 0.011194080 0.011880775 0.012634556 0.013381143 0.013669458 0.013993658 0.014630541 0.014866487 0.015420028 0.015901098 0.016033885 0.016718752 0.018643657 0.019257053 0.019434937 0.020206441 0.020543996 0.021545736 0.021752678 0.022428472 0.022808191 0.023491672 0.023801394 0.024539965 0.025903454 0.026575201 0.026949628 0.027137053 0.027468005 0.028353881 0.028823105 0.029840907 0.031029294 0.031582245 0.034234795 0.034803640 0.036032606 0.039069069 0.039572862 0.042000023 0.045431299 0.046134173 0.046732052 0.048854441 0.049700304 0.050089583 0.050838737 0.051549957 0.052200078 0.052289648 0.052416669 0.053022015 0.053642736 0.055002769 0.056110029 0.056448305 0.056725126 0.057017192 0.057096313 0.057797542 0.058626483 0.059272167 0.059782369 0.061351946 0.062163993 0.062944367 0.064338185 0.064585844 0.065114537 0.066040868 0.067574852 0.067835644 0.069021115 0.070507525 0.071526590 0.072232282 0.072640277 0.072969696 0.073069248 0.078677187 0.080465577 0.081936685 0.082599383 0.083531897 0.084597138 0.089056539 0.089449680 0.089828408 0.091343535 0.093335666 0.094582953 0.095501928 0.096300009 0.096870963 0.098573426 0.100194637 0.100705188 0.102807299 0.103997013 0.104681535 0.106920539 0.109309500 0.111091106 0.112372505 0.112882358 0.114016705 0.114818057 0.117023534 0.117443688 0.118638870 0.119195671 0.120688840 0.122238882 0.125096827 0.125865305 0.128617807 0.129063193 0.131078068 0.133874101 0.136801800 0.137867632 0.138612073 0.139697698 0.140415338 0.143430455 0.144579251 0.145898952 0.146814639 0.152010115 0.153608960 0.154130366 0.159647428 0.160848884 0.168575600 0.171465342 0.176324809 0.179141165 0.181643240 0.184538591 0.189171621 0.190498312 0.191992139 0.201375817 0.202245159 0.206342688 0.206968140 0.207269763 0.212490842 0.212653596 0.215634843 0.217025349 0.220431216 0.220938208 0.224622955 0.225151412 0.227171718 0.231910403 0.234608833 0.236208050 0.238588514 0.246308209 0.248445629 0.252704782 0.256567632 0.257233683 0.258336208 0.262573516 0.271585907 0.282929702 0.292040499 0.300140551 0.300254249 0.301117769 0.307165701 0.307798917 0.309857100 0.319975405 0.321384136 0.326468255 0.330927796 0.336688478 0.347767247 0.352030053 0.355651263 0.360842219 0.362114162 0.364155557 0.384573475 0.407262628 0.414453010 0.430304933 0.431719850 0.435406835 0.451159331 0.464783291 0.475679824 0.478925035 0.480506146 0.486537012 0.498907090 0.503876164 0.515207834 0.518044605 0.543859281 0.566943149 0.567739152 0.586817612 0.591810343 0.605896828 0.644289784 0.645562132 0.668099095 0.675613103 0.687423594 0.703735730 0.704135850 0.704402127 0.711261853 0.717277802 0.734304971 0.738034377 0.739763014 0.747112964 0.750857600 0.771618838 0.775991206 0.809275124 0.821858096 0.824169817 0.828944487 0.834310246 0.848301857 0.849568244 0.851427411 0.854658511 0.863524471 0.867476997 0.875951233 0.887592637 0.891375946 0.892330353 0.893709689 0.902129583 0.910418778 0.918004510 0.922665927 0.924569256 0.932025016 0.936053456 0.956127755 0.962727052 0.965375162 0.970110091 0.977289780 0.982583420 0.998668043 1.013025992 1.016308305 1.021940822 1.040269456 1.055140053 1.071317215 1.073124579 1.080040699 1.087468641 1.108549329 1.110440579 1.118315588 1.119263645 1.122636665 1.123989712 1.141901681 1.149911957 1.161776413 1.170199602 1.177340091 1.188834617 1.200790281 1.222183756 1.234222967 1.258247533 1.296509243 1.298861540 1.314752511 1.326483770 1.327515844 1.330261690 1.331449849 1.334824662 1.342479912 1.349229007 1.369006346 1.380016548 1.381343675 1.381888475 1.429543561 1.513003691 1.557991495 1.684849948 1.922877403</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">294</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91837042" y3="-0.95480869" z3="-0.68173808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60270915" y3="-1.95104042" z3="-1.54593862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08532588" y3="-0.99651439" z3="-1.40904526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77608" y3="1.47732412" z3="-1.06484058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28738143" y3="0.31112606" z3="-0.50121022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.657013" y3="2.73814989" z3="-1.15667571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0061276" y3="2.73566364" z3="-0.8490782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37975423" y3="4.99574177" z3="-0.38268523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80972272" y3="3.85338531" z3="-0.89322308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75353931" y3="5.87197868" z3="-0.18685883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09188728" y3="1.61219019" z3="-1.68135328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12670986" y3="0.35846392" z3="0.21570558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71337744" y3="0.38489396" z3="-0.64263501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60854595" y3="0.73524433" z3="0.28466826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66338604" y3="-0.85587201" z3="-1.50618946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09337354" y3="-2.47211928" z3="-1.32406706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01783616" y3="-5.49060926" z3="-6.27581499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75160965" y3="-5.05563126" z3="-5.30822738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0532488" y3="-3.91376984" z3="-2.85155624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7180391" y3="-3.67505763" z3="-5.16179246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4647748" y3="-5.88177079" z3="-4.21868711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13001921" y3="-5.30474208" z3="-3.00008826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37793043" y3="-3.07242256" z3="-3.94015825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94882964" y3="-3.00814984" z3="-5.99615025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51539698" y3="-6.96952703" z3="-4.31180826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94385679" y3="-5.93743839" z3="-2.12808585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6512403" y3="-3.3648119" z3="-1.60703878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34718872" y3="-3.84806786" z3="-0.85912684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69009744" y3="-4.85101386" z3="-1.12663081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38021394" y3="-3.54498934" z3="0.58926432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40952089" y3="-3.06716898" z3="3.34748974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6861053" y3="-4.57897978" z3="1.48263505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10871762" y3="-2.26731762" z3="1.08830955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12007278" y3="-2.03073472" z3="2.45861453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69226842" y3="-4.34213424" z3="2.85607976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87784245" y3="-5.58718579" z3="1.1039652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09873504" y3="-1.42794859" z3="0.42365678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10678433" y3="-1.02262118" z3="2.81601527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89681118" y3="-5.1658945" z3="3.5451746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40774593" y3="-2.88507491" z3="4.4261529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33031183" y3="-1.73660051" z3="-3.91082445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46542461" y3="-1.33083995" z3="-3.00873836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33957777" y3="3.71196074" z3="-1.05188192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13464365" y3="-2.9830501" z3="-1.70824382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92005251" y3="-3.1616876" z3="-0.5652684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11095617" y3="-2.28810161" z3="0.36845596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83764039" y3="-0.72289639" z3="0.62799656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71297978" y3="-0.25745214" z3="-0.95224358">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52776206" y3="0.455227" z3="1.20678775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06820794" y3="-1.06379141" z3="1.99591963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40364105" y3="-4.37301206" z3="-0.33115648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11976782" y3="-4.61369999" z3="0.87070828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02046351" y3="0.03599372" z3="-1.75659422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3725622" y3="0.60878465" z3="-0.76281152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34123985" y3="-1.08770542" z3="-1.32249575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64206154" y3="0.557793" z3="0.55339117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15966428" y3="0.15232686" z3="2.20246047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.996791" y3="1.45163341" z3="1.30699855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52982754" y3="-0.11701188" z3="2.33006207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.8813327" y3="-1.73444687" z3="1.66686821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56986457" y3="-1.52248895" z3="2.86832411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05691009" y3="-4.03352153" z3="0.88760221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50872163" y3="-4.35823181" z3="1.75011812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34855105" y3="-5.68778845" z3="0.86505316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27892607" y3="-2.19671283" z3="-0.17395062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13567504" y3="-3.29364652" z3="-1.03589554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49160553" y3="-4.45276217" z3="-0.62010987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99580903" y3="-4.50988756" z3="0.67693511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14461739" y3="-3.45192049" z3="1.56882552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77940568" y3="-2.29521703" z3="1.13442309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49204406" y3="-3.22157759" z3="-2.06673785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34988118" y3="-5.29303209" z3="-1.30057377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25873764" y3="-5.69886533" z3="1.10682079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73840832" y3="-3.5339633" z3="2.57803378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87339053" y3="-1.44796032" z3="1.81510004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49066484" y3="4.02113644" z3="0.03395501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86115669" y3="3.80685773" z3="-0.02888827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39898717" y3="3.28185483" z3="-1.19885311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6081156" y3="2.99621792" z3="-2.30895787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23811378" y3="3.20940898" z3="-2.22690759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0457355" y3="4.38846296" z3="0.96190147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50992175" y3="4.01840678" z3="0.82165146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83401536" y3="2.99194954" z3="-1.25423344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06733165" y3="2.5978318" z3="-3.2144341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39561655" y3="2.96177828" z3="-3.08005294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16555993" y3="-5.91160665" z3="2.29473835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76474627" y3="-6.40039826" z3="0.24298612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31658472" y3="2.70975805" z3="-2.32973947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4615721" y3="3.03251636" z3="-0.21253942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62722428" y3="0.16379835" z3="-2.01991477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95151203" y3="1.41095884" z3="-1.88222175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80894228" y3="0.0922823" z3="-2.80823508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28796226" y3="1.19973036" z3="-3.46290956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32420641" y3="-0.86936158" z3="-2.89400649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19448617" y3="1.13250021" z3="-4.07080123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45599972" y3="2.53167252" z3="-2.59980329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59229554" y3="2.42888596" z3="-3.36586103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92473913" y3="3.48397607" z3="-2.54455511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95864643" y3="3.30352025" z3="-3.91076014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57935093" y3="3.90660959" z3="-0.2518378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76057966" y3="5.05807593" z3="-0.0610666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9279817" y3="3.9604003" z3="0.20028536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44436875" y3="5.10630889" z3="0.75592385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55754212" y3="3.07337695" z3="0.10841891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48342511" y3="5.12155743" z3="1.09682576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32762201" y3="6.23383343" z3="0.50386014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64222264" y3="6.26399852" z3="0.89797832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68991503" y3="7.11412194" z3="0.63043979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06689806" y3="7.17198368" z3="1.33505085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35361469" y3="-3.92869054" z3="-2.87247227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53417119" y3="-4.9650715" z3="-2.54874537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22758073" y3="-3.6046318" z3="-3.46883531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47963925" y3="-3.92062052" z3="-3.54294194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69750705" y3="-1.59461548" z3="-2.09027014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43434631" y3="-1.11984292" z3="-2.76342463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53294167" y3="-0.93358819" z3="-1.22493936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74837342" y3="-1.63726983" z3="-2.64823247">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9184,-.9548,-.6817;6.6027,-1.951,-1.5459;6.0853,-.9965,-1.409;4.7761,1.4773,-1.0648;4.2874,.3111,-.5012;2.657,2.7381,-1.1567;4.0061,2.7357,-.8491;2.3798,4.9957,-.3827;1.8097,3.8534,-.8932;1.7535,5.872,-.1869;2.0919,1.6122,-1.6814;3.1267,.3585,.2157;1.7134,.3849,-.6426;.6085,.7352,.2847;1.6634,-.8559,-1.5062;1.0934,-2.4721,-1.3241;2.0178,-5.4906,-6.2758;1.7516,-5.0556,-5.3082;1.0532,-3.9138,-2.8516;1.718,-3.6751,-5.1618;1.4648,-5.8818,-4.2187;1.13,-5.3047,-3.0001;1.3779,-3.0724,-3.9402;1.9488,-3.0081,-5.9962;1.5154,-6.9695,-4.3118;.9439,-5.9374,-2.1281;.6512,-3.3648,-1.607;-.3472,-3.8481,-.8591;-.6901,-4.851,-1.1266;-.3802,-3.545,.5893;-.4095,-3.0672,3.3475;-.6861,-4.579,1.4826;-.1087,-2.2673,1.0883;-.1201,-2.0307,2.4586;-.6923,-4.3421,2.8561;-.8778,-5.5872,1.104;.0987,-1.4279,.4237;.1068,-1.0226,2.816;-.8968,-5.1659,3.5452;-.4077,-2.8851,4.4262;1.3303,-1.7366,-3.9108;1.4654,-1.3308,-3.0087;.3396,3.712,-1.0519;-2.1346,-2.9831,-1.7082;-2.9201,-3.1617,-.5653;-3.111,-2.2881,.3685;-3.8376,-.7229,.628;-4.713,-.2575,-.9522;-2.5278,.4552,1.2068;-5.0682,-1.0638,1.9959;-3.4036,-4.373,-.3312;-4.1198,-4.6137,.8707;-4.0205,.036,-1.7566;-5.3726,.6088,-.7628;-5.3412,-1.0877,-1.3225;-1.6421,.5578,.5534;-2.1597,.1523,2.2025;-2.9968,1.4516,1.307;-5.5298,-.117,2.3301;-5.8813,-1.7344,1.6669;-4.5699,-1.5225,2.8683;-5.0569,-4.0335,.8876;-3.5087,-4.3582,1.7501;-4.3486,-5.6878,.8651;4.2789,-2.1967,-.174;4.1357,-3.2936,-1.0359;3.4916,-4.4528,-.6201;2.9958,-4.5099,.6769;3.1446,-3.4519,1.5688;3.7794,-2.2952,1.1344;4.492,-3.2216,-2.0667;3.3499,-5.293,-1.3006;2.2587,-5.6989,1.1068;2.7384,-3.534,2.578;3.8734,-1.448,1.8151;-.4907,4.0211,.034;-1.8612,3.8069,-.0289;-2.399,3.2819,-1.1989;-1.6081,2.9962,-2.309;-.2381,3.2094,-2.2269;-.0457,4.3885,.9619;-2.5099,4.0184,.8217;-3.834,2.9919,-1.2542;-2.0673,2.5978,-3.2144;.3956,2.9618,-3.0801;2.1656,-5.9116,2.2947;1.7647,-6.4004,.243;-4.3166,2.7098,-2.3297;-4.4616,3.0325,-.2125;6.6272,.1638,-2.0199;5.9515,1.411,-1.8822;7.8089,.0923,-2.8082;8.288,1.1997,-3.4629;8.3242,-.8694,-2.894;9.1945,1.1325,-4.0708;6.456,2.5317,-2.5998;7.5923,2.4289,-3.3659;5.9247,3.484,-2.5446;7.9586,3.3035,-3.9108;4.5794,3.9066,-.2518;3.7606,5.0581,-.0611;5.928,3.9604,.2003;6.4444,5.1063,.7559;6.5575,3.0734,.1084;7.4834,5.1216,1.0968;4.3276,6.2338,.5039;5.6422,6.264,.898;3.6899,7.1141,.6304;6.0669,7.172,1.3351;-2.3536,-3.9287,-2.8725;-2.5342,-4.9651,-2.5487;-3.2276,-3.6046,-3.4688;-1.4796,-3.9206,-3.5429;-1.6975,-1.5946,-2.0903;-2.4343,-1.1198,-2.7634;-1.5329,-.9336,-1.2249;-.7484,-1.6373,-2.6482;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931719131</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000315137078 0.000050373158 0.022876271195 0.005350603232</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057134422 -0.000412507 0.000064269 0.000148823 0.000222370 0.000340759 0.000398205 0.000571726 0.000716571 0.000778333 0.000929569 0.001017972 0.001191986 0.001264974 0.001384506 0.001498839 0.001616395 0.001723298 0.001775947 0.002075479 0.002306740 0.002586101 0.002810557 0.003047825 0.003304091 0.003671074 0.003930466 0.004520836 0.004759849 0.004895578 0.005170840 0.005333392 0.006001010 0.006365374 0.006505204 0.006826871 0.006935169 0.007397494 0.008191844 0.008659641 0.008815140 0.009399476 0.009756794 0.009876748 0.010961896 0.011202955 0.011882200 0.012635294 0.013380959 0.013685045 0.013993922 0.014632785 0.014868555 0.015420436 0.015900441 0.016038881 0.016735198 0.018644002 0.019259103 0.019439791 0.020210050 0.020548344 0.021546145 0.021753758 0.022429005 0.022809053 0.023491497 0.023801365 0.024544147 0.025904159 0.026577637 0.026972934 0.027141210 0.027469059 0.028360845 0.028821265 0.029822434 0.031040343 0.031582326 0.034241587 0.034806634 0.036032826 0.039071566 0.039589917 0.042001555 0.045436715 0.046131124 0.046734425 0.048858174 0.049700288 0.050091846 0.050838747 0.051550426 0.052202891 0.052289874 0.052416735 0.053023100 0.053642977 0.055002977 0.056113141 0.056448593 0.056725874 0.057020313 0.057098496 0.057800249 0.058627236 0.059274794 0.059785950 0.061352421 0.062169042 0.062950076 0.064339834 0.064585798 0.065117858 0.066041654 0.067575028 0.067846494 0.069022848 0.070506822 0.071527682 0.072237151 0.072640782 0.072973257 0.073072146 0.078680357 0.080455105 0.081928624 0.082589285 0.083527575 0.084608615 0.089070960 0.089452342 0.089828271 0.091345725 0.093335367 0.094583070 0.095501952 0.096300843 0.096872007 0.098573396 0.100195149 0.100705350 0.102812126 0.103998763 0.104701119 0.106930094 0.109327466 0.111097890 0.112396377 0.112884612 0.114018036 0.114825922 0.117024522 0.117444648 0.118639068 0.119196589 0.120689383 0.122238943 0.125096858 0.125865355 0.128632656 0.129063576 0.131080174 0.133877650 0.136835682 0.137880845 0.138612197 0.139709557 0.140418187 0.143432997 0.144577867 0.145898764 0.146814590 0.152010163 0.153607757 0.154130152 0.159642464 0.160847354 0.168575525 0.171465913 0.176392132 0.179153963 0.181643790 0.184538563 0.189178980 0.190538834 0.191993091 0.201376202 0.202246677 0.206348543 0.206968571 0.207269982 0.212498741 0.212675965 0.215636901 0.217024061 0.220431760 0.220938175 0.224623587 0.225151424 0.227175860 0.231912219 0.234609006 0.236216646 0.238588636 0.246311618 0.248452932 0.252712228 0.256570994 0.257234595 0.258338786 0.262574974 0.271588538 0.282930687 0.292041328 0.300142656 0.300263373 0.301121089 0.307173911 0.307799787 0.309858262 0.319977961 0.321389494 0.326472360 0.330931802 0.336688514 0.347767280 0.352030157 0.355651222 0.360849256 0.362118733 0.364155876 0.384576312 0.407293184 0.414456678 0.430311029 0.431718035 0.435409813 0.451160773 0.464784742 0.475680122 0.478943901 0.480507565 0.486544650 0.498907102 0.503876500 0.515213082 0.518047025 0.543873620 0.566943208 0.567739180 0.586826548 0.591808881 0.605914685 0.644290538 0.645578317 0.668103434 0.675616175 0.687423711 0.703736205 0.704136650 0.704402761 0.711284015 0.717279017 0.734306765 0.738035465 0.739770553 0.747114479 0.750858609 0.771620071 0.775991724 0.809303568 0.821859135 0.824179842 0.828945010 0.834316347 0.848312192 0.849571480 0.851428153 0.854658460 0.863525340 0.867477417 0.875957021 0.887592915 0.891381268 0.892334755 0.893723973 0.902130217 0.910454404 0.918004347 0.922672436 0.924569387 0.932025891 0.936069368 0.956133168 0.962727341 0.965381868 0.970112833 0.977289303 0.982583586 0.998669318 1.013049080 1.016308324 1.021945159 1.040280766 1.055152401 1.071325917 1.073125286 1.080127862 1.087487988 1.108552420 1.110440653 1.118315690 1.119272782 1.122636674 1.123991843 1.141903829 1.149924844 1.161777964 1.170199598 1.177361140 1.188866533 1.200795485 1.222184276 1.234228409 1.258250898 1.296510486 1.298974915 1.314753039 1.326483787 1.327515934 1.330274324 1.331457560 1.334827306 1.342487909 1.349240137 1.369034016 1.380016692 1.381345467 1.381888564 1.429545344 1.513002560 1.557993471 1.684852727 1.922878947</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">295</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91933498" y3="-0.95529263" z3="-0.68044121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60332146" y3="-1.9515327" z3="-1.54524486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08636691" y3="-0.99688693" z3="-1.4076125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77807055" y3="1.47719045" z3="-1.0617043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28875732" y3="0.31071603" z3="-0.49914119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65918217" y3="2.73735514" z3="-1.15647852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00763246" y3="2.7353618" z3="-0.84645886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37932896" y3="4.99457109" z3="-0.3827817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81096289" y3="3.85212651" z3="-0.89493705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75279581" y3="5.87023725" z3="-0.19070697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09564926" y3="1.61108029" z3="-1.68218594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12743692" y3="0.3577793" z3="0.21678722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71504389" y3="0.3847037" z3="-0.6432266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60928889" y3="0.73636746" z3="0.28246133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66541062" y3="-0.85628907" z3="-1.50650366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09229068" y3="-2.47028746" z3="-1.32496194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01542794" y3="-5.4877283" z3="-6.2770678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74897924" y3="-5.05299716" z3="-5.30945817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05076433" y3="-3.91179296" z3="-2.85236966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7154971" y3="-3.67251339" z3="-5.16258671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4618077" y3="-5.87935378" z3="-4.22025293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12712732" y3="-5.30264448" z3="-3.00150829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37531747" y3="-3.07020915" z3="-3.94083711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94647951" y3="-3.00542168" z3="-5.99670513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51223519" y3="-6.96704644" z3="-4.31371462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94082571" y3="-5.93551928" z3="-2.12972161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64987633" y3="-3.36366428" z3="-1.60710425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3495296" y3="-3.84481783" z3="-0.85988708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69339248" y3="-4.84746622" z3="-1.12753872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38101063" y3="-3.54290371" z3="0.58890569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40681775" y3="-3.0681077" z3="3.34780343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68575944" y3="-4.57779628" z3="1.48173394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10828793" y3="-2.26621793" z3="1.08909496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11822294" y3="-2.03094718" z3="2.4595843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69003516" y3="-4.34268603" z3="2.85548165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87741945" y3="-5.58630646" z3="1.10267559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09808685" y3="-1.42581905" z3="0.42501193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10911529" y3="-1.02313066" z3="2.81774402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89425971" y3="-5.16697825" z3="3.54358255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4036215" y3="-2.8871768" z3="4.42663717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32752394" y3="-1.73432393" z3="-3.91124064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46441101" y3="-1.32899674" z3="-3.00917623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34152815" y3="3.70966061" z3="-1.05840574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13559818" y3="-2.97771468" z3="-1.70720314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92081278" y3="-3.15843033" z3="-0.56419682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11030845" y3="-2.28755796" z3="0.37197792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8390869" y3="-0.72319806" z3="0.63423823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72526925" y3="-0.26285691" z3="-0.94158612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52893694" y3="0.46011155" z3="1.20257357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05757485" y3="-1.06579945" z3="2.01241845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40431439" y3="-4.37043375" z3="-0.33197664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11959023" y3="-4.61360299" z3="0.86994887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03716951" y3="0.02103675" z3="-1.75318198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37788393" y3="0.60882264" z3="-0.75271344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3612153" y3="-1.09184791" z3="-1.30130684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65022749" y3="0.56817092" z3="0.54104347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.14931038" y3="0.15699806" z3="2.19416077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00198732" y3="1.45377108" z3="1.30990815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51719326" y3="-0.11989056" z3="2.35228902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87305223" y3="-1.73689598" z3="1.68974448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55063907" y3="-1.52528571" z3="2.8795758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05652566" y3="-4.03292598" z3="0.88860731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50747648" y3="-4.35979301" z3="1.74950996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34909395" y3="-5.68729858" z3="0.86166063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27927305" y3="-2.19741271" z3="-0.17387455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13533813" y3="-3.29335663" z3="-1.03694507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49087634" y3="-4.45271791" z3="-0.62223083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99570725" y3="-4.51139635" z3="0.67497689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14489328" y3="-3.45423925" z3="1.56783903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77968458" y3="-2.29694031" z3="1.13437054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49127425" y3="-3.22001227" z3="-2.06780388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34761737" y3="-5.29121174" z3="-1.30377857">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25825889" y3="-5.70046678" z3="1.10385963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73863478" y3="-3.53709727" z3="2.57697024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87322702" y3="-1.4496286" z3="1.81559826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49286182" y3="4.02051731" z3="0.02365301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86294859" y3="3.80414859" z3="-0.04315939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39609639" y3="3.2752277" z3="-1.21362515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60105648" y3="2.98799466" z3="-2.32046893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23152689" y3="3.20347943" z3="-2.2342015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05154759" y3="4.39033129" z3="0.95244696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51498466" y3="4.01686312" z3="0.80457962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83052508" y3="2.98266794" z3="-1.27301446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05660954" y3="2.58626463" z3="-3.22631431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.4057396" y3="2.95404399" z3="-3.08403404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16519988" y3="-5.91415077" z3="2.29154652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76390916" y3="-6.4011494" z3="0.23951772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30754862" y3="2.68909834" z3="-2.34804778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46320744" y3="3.03280608" z3="-0.23476505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62866415" y3="0.16364153" z3="-2.01772271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95357315" y3="1.41102367" z3="-1.87891792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80984639" y3="0.09211438" z3="-2.80679891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28885957" y3="1.19975903" z3="-3.46116891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32455829" y3="-0.8697408" z3="-2.89362108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19477956" y3="1.13243116" z3="-4.06991892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45828561" y3="2.53209556" z3="-2.5957888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59395757" y3="2.42925434" z3="-3.36271776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92753194" y3="3.48464292" z3="-2.53948332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96032828" y3="3.30407368" z3="-3.90732317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57911073" y3="3.90647526" z3="-0.24803401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75930173" y3="5.05743284" z3="-0.05800243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92731703" y3="3.96080509" z3="0.20540549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44235212" y3="5.10672249" z3="0.76236284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55770049" y3="3.07410094" z3="0.11276824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48117275" y3="5.12245716" z3="1.10421299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32498285" y3="6.23319511" z3="0.50842116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63909954" y3="6.26381185" z3="0.90434796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68664359" y3="7.1132445" z3="0.63484576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06267254" y3="7.17183645" z3="1.34251492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35534297" y3="-3.92127776" z3="-2.87339047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53643388" y3="-4.95831841" z3="-2.55104787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22857517" y3="-3.5949192" z3="-3.46884292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48147368" y3="-3.91294116" z3="-3.54401656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69855731" y3="-1.58861898" z3="-2.08594169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43619459" y3="-1.11207932" z3="-2.7564602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53282024" y3="-0.92993333" z3="-1.21907122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74965094" y3="-1.62995988" z3="-2.64478005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9193,-.9553,-.6804;6.6033,-1.9515,-1.5452;6.0864,-.9969,-1.4076;4.7781,1.4772,-1.0617;4.2888,.3107,-.4991;2.6592,2.7374,-1.1565;4.0076,2.7354,-.8465;2.3793,4.9946,-.3828;1.811,3.8521,-.8949;1.7528,5.8702,-.1907;2.0956,1.6111,-1.6822;3.1274,.3578,.2168;1.715,.3847,-.6432;.6093,.7364,.2825;1.6654,-.8563,-1.5065;1.0923,-2.4703,-1.325;2.0154,-5.4877,-6.2771;1.749,-5.053,-5.3095;1.0508,-3.9118,-2.8524;1.7155,-3.6725,-5.1626;1.4618,-5.8794,-4.2203;1.1271,-5.3026,-3.0015;1.3753,-3.0702,-3.9408;1.9465,-3.0054,-5.9967;1.5122,-6.967,-4.3137;.9408,-5.9355,-2.1297;.6499,-3.3637,-1.6071;-.3495,-3.8448,-.8599;-.6934,-4.8475,-1.1275;-.381,-3.5429,.5889;-.4068,-3.0681,3.3478;-.6858,-4.5778,1.4817;-.1083,-2.2662,1.0891;-.1182,-2.0309,2.4596;-.69,-4.3427,2.8555;-.8774,-5.5863,1.1027;.0981,-1.4258,.425;.1091,-1.0231,2.8177;-.8943,-5.167,3.5436;-.4036,-2.8872,4.4266;1.3275,-1.7343,-3.9112;1.4644,-1.329,-3.0092;.3415,3.7097,-1.0584;-2.1356,-2.9777,-1.7072;-2.9208,-3.1584,-.5642;-3.1103,-2.2876,.372;-3.8391,-.7232,.6342;-4.7253,-.2629,-.9416;-2.5289,.4601,1.2026;-5.0576,-1.0658,2.0124;-3.4043,-4.3704,-.332;-4.1196,-4.6136,.8699;-4.0372,.021,-1.7532;-5.3779,.6088,-.7527;-5.3612,-1.0918,-1.3013;-1.6502,.5682,.541;-2.1493,.157,2.1942;-3.002,1.4538,1.3099;-5.5172,-.1199,2.3523;-5.8731,-1.7369,1.6897;-4.5506,-1.5253,2.8796;-5.0565,-4.0329,.8886;-3.5075,-4.3598,1.7495;-4.3491,-5.6873,.8617;4.2793,-2.1974,-.1739;4.1353,-3.2934,-1.0369;3.4909,-4.4527,-.6222;2.9957,-4.5114,.675;3.1449,-3.4542,1.5678;3.7797,-2.2969,1.1344;4.4913,-3.22,-2.0678;3.3476,-5.2912,-1.3038;2.2583,-5.7005,1.1039;2.7386,-3.5371,2.577;3.8732,-1.4496,1.8156;-.4929,4.0205,.0237;-1.8629,3.8041,-.0432;-2.3961,3.2752,-1.2136;-1.6011,2.988,-2.3205;-.2315,3.2035,-2.2342;-.0515,4.3903,.9524;-2.515,4.0169,.8046;-3.8305,2.9827,-1.273;-2.0566,2.5863,-3.2263;.4057,2.954,-3.084;2.1652,-5.9142,2.2915;1.7639,-6.4011,.2395;-4.3075,2.6891,-2.348;-4.4632,3.0328,-.2348;6.6287,.1636,-2.0177;5.9536,1.411,-1.8789;7.8098,.0921,-2.8068;8.2889,1.1998,-3.4612;8.3246,-.8697,-2.8936;9.1948,1.1324,-4.0699;6.4583,2.5321,-2.5958;7.594,2.4293,-3.3627;5.9275,3.4846,-2.5395;7.9603,3.3041,-3.9073;4.5791,3.9065,-.248;3.7593,5.0574,-.058;5.9273,3.9608,.2054;6.4424,5.1067,.7624;6.5577,3.0741,.1128;7.4812,5.1225,1.1042;4.325,6.2332,.5084;5.6391,6.2638,.9043;3.6866,7.1132,.6348;6.0627,7.1718,1.3425;-2.3553,-3.9213,-2.8734;-2.5364,-4.9583,-2.551;-3.2286,-3.5949,-3.4688;-1.4815,-3.9129,-3.544;-1.6986,-1.5886,-2.0859;-2.4362,-1.1121,-2.7565;-1.5328,-.9299,-1.2191;-.7497,-1.63,-2.6448;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926903160</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001085615285 0.000172503233 0.021170284973 0.005321797425</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057135749 -0.000359661 0.000044350 0.000081710 0.000223011 0.000331711 0.000403419 0.000574584 0.000715191 0.000780163 0.000904475 0.001019623 0.001190399 0.001259564 0.001384242 0.001499099 0.001620089 0.001721424 0.001775749 0.002066904 0.002306740 0.002585854 0.002810567 0.003047101 0.003305121 0.003671945 0.003930789 0.004526193 0.004762672 0.004884726 0.005169355 0.005332539 0.006001045 0.006367976 0.006507595 0.006819088 0.006939351 0.007397727 0.008192507 0.008660850 0.008815026 0.009400003 0.009753857 0.009880985 0.010961966 0.011210571 0.011882921 0.012639775 0.013380893 0.013697567 0.013994767 0.014632874 0.014870532 0.015419742 0.015900260 0.016046228 0.016750371 0.018647670 0.019268742 0.019443006 0.020211968 0.020550148 0.021548180 0.021767354 0.022432675 0.022807392 0.023492188 0.023800658 0.024552921 0.025905588 0.026591069 0.027027397 0.027142115 0.027475122 0.028371119 0.028824161 0.029821057 0.031044579 0.031582574 0.034243179 0.034807219 0.036032789 0.039076207 0.039609417 0.042003647 0.045438603 0.046132350 0.046735243 0.048860004 0.049700347 0.050092373 0.050838600 0.051551437 0.052206725 0.052290437 0.052416739 0.053023832 0.053644195 0.055001625 0.056114863 0.056449087 0.056724412 0.057017580 0.057093001 0.057804657 0.058631277 0.059277552 0.059789269 0.061352788 0.062169038 0.062963768 0.064341614 0.064585774 0.065123176 0.066046697 0.067574026 0.067853715 0.069024118 0.070505946 0.071529190 0.072245171 0.072644351 0.072981771 0.073077761 0.078684429 0.080459845 0.081930059 0.082595640 0.083527458 0.084615356 0.089078525 0.089457237 0.089828161 0.091346122 0.093335433 0.094583994 0.095501968 0.096300979 0.096872714 0.098573557 0.100192177 0.100707169 0.102816136 0.104003800 0.104714174 0.106933209 0.109363860 0.111099754 0.112418043 0.112886644 0.114018446 0.114848013 0.117024807 0.117447083 0.118639031 0.119197698 0.120690717 0.122238804 0.125098663 0.125865202 0.128658359 0.129064283 0.131080946 0.133886964 0.136860139 0.137887131 0.138613042 0.139721139 0.140420445 0.143433092 0.144577787 0.145900355 0.146817444 0.152010548 0.153608994 0.154130386 0.159638038 0.160848117 0.168576111 0.171468013 0.176453102 0.179166209 0.181646042 0.184539007 0.189187787 0.190583669 0.191992575 0.201376620 0.202247556 0.206352188 0.206968998 0.207270603 0.212502287 0.212708344 0.215638965 0.217024562 0.220432342 0.220939834 0.224624833 0.225151512 0.227191287 0.231913270 0.234609752 0.236229949 0.238588755 0.246319901 0.248464639 0.252726942 0.256578049 0.257236828 0.258346511 0.262578342 0.271592538 0.282931032 0.292044302 0.300145245 0.300266436 0.301122707 0.307181593 0.307802054 0.309860566 0.319983054 0.321396136 0.326482533 0.330943254 0.336688573 0.347768085 0.352030216 0.355651526 0.360859014 0.362130479 0.364156474 0.384577777 0.407342010 0.414456849 0.430318500 0.431723924 0.435415239 0.451161130 0.464786097 0.475686886 0.478967011 0.480508900 0.486558686 0.498907414 0.503877481 0.515224884 0.518050277 0.543898352 0.566944139 0.567739218 0.586835215 0.591809707 0.605946769 0.644290872 0.645610764 0.668109248 0.675625048 0.687423931 0.703738390 0.704136514 0.704406162 0.711298341 0.717284150 0.734317305 0.738037067 0.739774626 0.747118405 0.750861285 0.771621845 0.775992722 0.809335311 0.821862166 0.824201298 0.828946730 0.834324608 0.848334625 0.849573473 0.851428351 0.854659702 0.863525341 0.867477601 0.875965694 0.887594988 0.891383202 0.892348237 0.893731426 0.902131372 0.910512296 0.918004550 0.922689408 0.924570254 0.932027399 0.936082586 0.956137757 0.962746275 0.965387366 0.970116113 0.977293499 0.982586109 0.998673073 1.013063259 1.016309553 1.021951010 1.040294819 1.055176603 1.071338192 1.073125695 1.080215076 1.087514351 1.108558347 1.110440867 1.118315810 1.119286119 1.122636764 1.123994249 1.141907239 1.149951344 1.161779917 1.170199889 1.177392150 1.188912951 1.200804200 1.222184499 1.234249393 1.258261506 1.296517939 1.299104419 1.314758389 1.326483898 1.327517341 1.330297463 1.331464977 1.334831961 1.342495365 1.349254756 1.369077127 1.380016807 1.381348285 1.381891425 1.429550234 1.513023205 1.557994865 1.684858553 1.922883744</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">296</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91315117" y3="-0.9568838" z3="-0.67583323">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59670483" y3="-1.95540304" z3="-1.53889135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08094772" y3="-1.00002833" z3="-1.40179286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77601806" y3="1.47580588" z3="-1.05708865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28436592" y3="0.31010361" z3="-0.49487335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65947147" y3="2.7397003" z3="-1.15573357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0074775" y3="2.73539414" z3="-0.84362533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38242072" y3="4.99835614" z3="-0.38558841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81267245" y3="3.85639136" z3="-0.89726686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75656544" y3="5.87607994" z3="-0.1907662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09443401" y3="1.6139644" z3="-1.68052797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12237068" y3="0.35904668" z3="0.21993935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71112459" y3="0.38834931" z3="-0.64173633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60467554" y3="0.74106531" z3="0.28273655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66117842" y3="-0.85217247" z3="-1.5056467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09174578" y3="-2.46577893" z3="-1.32542729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.011017" y3="-5.47270388" z3="-6.28481203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74596693" y3="-5.03999838" z3="-5.31588439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05020298" y3="-3.90393674" z3="-2.85588887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70897924" y3="-3.65970349" z3="-5.16732629">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46411252" y3="-5.86864408" z3="-4.22688373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.130521" y3="-5.29450849" z3="-3.00654476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37024832" y3="-3.06003814" z3="-3.943934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93591335" y3="-2.99081144" z3="-6.00119492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51756236" y3="-6.95611579" z3="-4.32188307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94792838" y3="-5.92910386" z3="-2.13505128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64906873" y3="-3.35721094" z3="-1.61016223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34685861" y3="-3.84351447" z3="-0.86038904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68841698" y3="-4.84699462" z3="-1.12759952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37694814" y3="-3.54107494" z3="0.58824589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39814378" y3="-3.06465818" z3="3.34676946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67403129" y3="-4.57705329" z3="1.48228802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11068835" y3="-2.26189578" z3="1.08673633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11788345" y3="-2.02614205" z3="2.45719291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.676165" y3="-4.34075393" z3="2.85584993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86217119" y3="-5.58591114" z3="1.10383877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09011166" y3="-1.42124128" z3="0.42184462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10519149" y3="-1.01706244" z3="2.81414439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87308943" y3="-5.16623604" z3="3.54550709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39324892" y3="-2.88297095" z3="4.42546483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31907136" y3="-1.72441609" z3="-3.91195291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45719605" y3="-1.3208413" z3="-3.00942747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34325296" y3="3.71486515" z3="-1.06288772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13721144" y3="-2.9817842" z3="-1.7053771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91955355" y3="-3.16174725" z3="-0.56064575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11042894" y3="-2.28780072" z3="0.3729335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8409973" y3="-0.72519343" z3="0.63573804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72941852" y3="-0.26602132" z3="-0.9387402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53160065" y3="0.4592536" z3="1.20286178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05849377" y3="-1.06903456" z3="2.01457236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39957817" y3="-4.37403885" z3="-0.32490001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10942545" y3="-4.61680055" z3="0.88029435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.04236845" y3="0.01107367" z3="-1.75352347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37592732" y3="0.61041024" z3="-0.7508136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.37170024" y3="-1.09241761" z3="-1.29321671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.65134179" y3="0.56515966" z3="0.54275408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1541579" y3="0.15853068" z3="2.19549739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00358788" y3="1.45409379" z3="1.30600126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51813097" y3="-0.12370756" z3="2.35558615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87367535" y3="-1.74007285" z3="1.6919284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55103752" y3="-1.52905812" z3="2.88112931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04705417" y3="-4.03745768" z3="0.90295384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49410428" y3="-4.36260564" z3="1.75688069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33727999" y3="-5.69124181" z3="0.8744936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27178592" y3="-2.19910129" z3="-0.17112801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13155677" y3="-3.29488558" z3="-1.03515302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.48918513" y3="-4.45586056" z3="-0.62234092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99205308" y3="-4.51615389" z3="0.6740653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13671976" y3="-3.4591263" z3="1.56764723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7695816" y3="-2.30037686" z3="1.1360212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48960486" y3="-3.22068919" z3="-2.06528363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35095601" y3="-5.29608529" z3="-1.30419717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25882163" y3="-5.70844935" z3="1.10127618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.72921216" y3="-3.54382398" z3="2.57615041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86079164" y3="-1.45430316" z3="1.81819525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49333033" y3="4.02564261" z3="0.01763175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86292788" y3="3.8072101" z3="-0.05188748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39321508" y3="3.27630672" z3="-1.22255233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.59586167" y3="2.98950893" z3="-2.32762539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.22711074" y3="3.20743024" z3="-2.23946083">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05428907" y3="4.39712139" z3="0.94657086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51669691" y3="4.01942465" z3="0.7947336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.82681745" y3="2.98042812" z3="-1.28328887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.04909772" y3="2.58636141" z3="-3.23395052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.41220014" y3="2.95791516" z3="-3.08816954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16816467" y3="-5.925493" z3="2.28870219">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76518087" y3="-6.40833404" z3="0.23584934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30235715" y3="2.68765084" z3="-2.35909446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4604179" y3="3.02762812" z3="-0.24555655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62537933" y3="0.15953121" z3="-2.0116531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95193183" y3="1.40782949" z3="-1.87361488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80672934" y3="0.08591987" z3="-2.80024045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28738665" y3="1.19253214" z3="-3.45513125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32002133" y3="-0.87673834" z3="-2.88637943">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19329427" y3="1.12362863" z3="-4.06367142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45837058" y3="2.52779523" z3="-2.59101779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59405689" y3="2.42295458" z3="-3.35763206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92884588" y3="3.48101629" z3="-2.53567463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96163989" y3="3.296932" z3="-3.90277449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58053703" y3="3.90644234" z3="-0.24648898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7624864" y3="5.05902275" z3="-0.05957255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92802257" y3="3.95949743" z3="0.20882997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44423847" y3="5.10573998" z3="0.76405319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.5566613" y3="3.07182401" z3="0.12006188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48242952" y3="5.12061854" z3="1.10732539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32926387" y3="6.23487825" z3="0.50554362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64290348" y3="6.26433282" z3="0.90272412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69218384" y3="7.11599735" z3="0.62948044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06736008" y3="7.17255219" z3="1.33965973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35662817" y3="-3.92791908" z3="-2.86901837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53574242" y3="-4.964356" z3="-2.54525739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23200725" y3="-3.60521606" z3="-3.4646479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48341237" y3="-3.91901182" z3="-3.5404038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70355759" y3="-1.59235485" z3="-2.08916185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44191678" y3="-1.11927394" z3="-2.76231594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53954722" y3="-0.93051585" z3="-1.22442515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75490964" y3="-1.6337918" z3="-2.64813651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9132,-.9569,-.6758;6.5967,-1.9554,-1.5389;6.0809,-1,-1.4018;4.776,1.4758,-1.0571;4.2844,.3101,-.4949;2.6595,2.7397,-1.1557;4.0075,2.7354,-.8436;2.3824,4.9984,-.3856;1.8127,3.8564,-.8973;1.7566,5.8761,-.1908;2.0944,1.614,-1.6805;3.1224,.359,.2199;1.7111,.3883,-.6417;.6047,.7411,.2827;1.6612,-.8522,-1.5056;1.0917,-2.4658,-1.3254;2.011,-5.4727,-6.2848;1.746,-5.04,-5.3159;1.0502,-3.9039,-2.8559;1.709,-3.6597,-5.1673;1.4641,-5.8686,-4.2269;1.1305,-5.2945,-3.0065;1.3702,-3.06,-3.9439;1.9359,-2.9908,-6.0012;1.5176,-6.9561,-4.3219;.9479,-5.9291,-2.1351;.6491,-3.3572,-1.6102;-.3469,-3.8435,-.8604;-.6884,-4.847,-1.1276;-.3769,-3.5411,.5882;-.3981,-3.0647,3.3468;-.674,-4.5771,1.4823;-.1107,-2.2619,1.0867;-.1179,-2.0261,2.4572;-.6762,-4.3408,2.8558;-.8622,-5.5859,1.1038;.0901,-1.4212,.4218;.1052,-1.0171,2.8141;-.8731,-5.1662,3.5455;-.3932,-2.883,4.4255;1.3191,-1.7244,-3.912;1.4572,-1.3208,-3.0094;.3433,3.7149,-1.0629;-2.1372,-2.9818,-1.7054;-2.9196,-3.1617,-.5606;-3.1104,-2.2878,.3729;-3.841,-.7252,.6357;-4.7294,-.266,-.9387;-2.5316,.4593,1.2029;-5.0585,-1.069,2.0146;-3.3996,-4.374,-.3249;-4.1094,-4.6168,.8803;-4.0424,.0111,-1.7535;-5.3759,.6104,-.7508;-5.3717,-1.0924,-1.2932;-1.6513,.5652,.5428;-2.1542,.1585,2.1955;-3.0036,1.4541,1.306;-5.5181,-.1237,2.3556;-5.8737,-1.7401,1.6919;-4.551,-1.5291,2.8811;-5.0471,-4.0375,.903;-3.4941,-4.3626,1.7569;-4.3373,-5.6912,.8745;4.2718,-2.1991,-.1711;4.1316,-3.2949,-1.0352;3.4892,-4.4559,-.6223;2.9921,-4.5162,.6741;3.1367,-3.4591,1.5676;3.7696,-2.3004,1.136;4.4896,-3.2207,-2.0653;3.351,-5.2961,-1.3042;2.2588,-5.7084,1.1013;2.7292,-3.5438,2.5762;3.8608,-1.4543,1.8182;-.4933,4.0256,.0176;-1.8629,3.8072,-.0519;-2.3932,3.2763,-1.2226;-1.5959,2.9895,-2.3276;-.2271,3.2074,-2.2395;-.0543,4.3971,.9466;-2.5167,4.0194,.7947;-3.8268,2.9804,-1.2833;-2.0491,2.5864,-3.234;.4122,2.9579,-3.0882;2.1682,-5.9255,2.2887;1.7652,-6.4083,.2358;-4.3024,2.6877,-2.3591;-4.4604,3.0276,-.2456;6.6254,.1595,-2.0117;5.9519,1.4078,-1.8736;7.8067,.0859,-2.8002;8.2874,1.1925,-3.4551;8.32,-.8767,-2.8864;9.1933,1.1236,-4.0637;6.4584,2.5278,-2.591;7.5941,2.423,-3.3576;5.9288,3.481,-2.5357;7.9616,3.2969,-3.9028;4.5805,3.9064,-.2465;3.7625,5.059,-.0596;5.928,3.9595,.2088;6.4442,5.1057,.7641;6.5567,3.0718,.1201;7.4824,5.1206,1.1073;4.3293,6.2349,.5055;5.6429,6.2643,.9027;3.6922,7.116,.6295;6.0674,7.1726,1.3397;-2.3566,-3.9279,-2.869;-2.5357,-4.9644,-2.5453;-3.232,-3.6052,-3.4646;-1.4834,-3.919,-3.5404;-1.7036,-1.5924,-2.0892;-2.4419,-1.1193,-2.7623;-1.5395,-.9305,-1.2244;-.7549,-1.6338,-2.6481;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662919857874</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001277525411 0.000213444720 0.018288371303 0.005297722792</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057135985 -0.000110210 0.000049108 0.000135621 0.000288380 0.000313544 0.000403256 0.000579012 0.000717316 0.000779232 0.000913040 0.001020858 0.001190166 0.001262567 0.001384569 0.001498996 0.001620193 0.001722400 0.001776798 0.002066866 0.002306789 0.002586444 0.002811005 0.003047134 0.003306431 0.003672676 0.003930900 0.004525885 0.004762711 0.004885408 0.005169861 0.005332770 0.006004470 0.006367955 0.006509384 0.006819298 0.006942761 0.007397894 0.008192697 0.008661482 0.008815160 0.009402822 0.009754092 0.009883510 0.010961945 0.011213444 0.011883005 0.012640993 0.013380957 0.013701197 0.013994772 0.014633057 0.014871213 0.015421268 0.015900469 0.016056219 0.016759262 0.018648103 0.019270138 0.019445449 0.020212934 0.020551671 0.021549611 0.021771888 0.022435969 0.022807507 0.023493068 0.023801192 0.024557267 0.025906344 0.026595004 0.027061959 0.027152286 0.027481579 0.028383327 0.028823440 0.029820964 0.031048176 0.031582677 0.034244995 0.034807109 0.036032776 0.039079017 0.039624016 0.042004633 0.045442175 0.046132477 0.046735841 0.048861637 0.049700377 0.050092350 0.050838836 0.051551992 0.052209433 0.052290799 0.052416739 0.053024566 0.053644706 0.055001635 0.056115827 0.056450044 0.056724351 0.057017581 0.057093393 0.057808136 0.058635157 0.059278508 0.059790792 0.061352927 0.062169466 0.062973520 0.064343254 0.064585936 0.065126504 0.066048554 0.067574204 0.067857705 0.069025210 0.070506019 0.071529308 0.072249103 0.072645628 0.072989966 0.073078068 0.078685475 0.080461908 0.081931650 0.082604035 0.083527572 0.084622723 0.089085440 0.089461887 0.089828278 0.091345933 0.093335628 0.094584518 0.095501945 0.096301192 0.096873356 0.098573577 0.100192815 0.100707798 0.102817915 0.104005532 0.104720401 0.106935404 0.109393438 0.111100743 0.112435575 0.112888876 0.114018871 0.114869043 0.117024847 0.117449663 0.118639235 0.119198120 0.120691032 0.122238702 0.125098807 0.125865895 0.128675766 0.129064237 0.131080778 0.133891425 0.136880883 0.137895482 0.138614700 0.139726295 0.140422348 0.143433034 0.144577966 0.145901795 0.146818022 0.152010949 0.153609691 0.154131346 0.159639138 0.160848277 0.168576953 0.171469006 0.176494128 0.179176002 0.181647058 0.184539317 0.189192972 0.190628050 0.191991864 0.201377883 0.202249415 0.206353474 0.206969453 0.207271133 0.212504520 0.212738128 0.215641025 0.217024537 0.220432536 0.220941160 0.224624188 0.225151501 0.227199800 0.231914350 0.234610552 0.236240826 0.238588767 0.246321697 0.248464567 0.252736708 0.256585617 0.257238823 0.258351285 0.262580846 0.271595724 0.282931144 0.292047224 0.300146628 0.300266489 0.301123912 0.307187513 0.307804426 0.309861427 0.319986607 0.321400095 0.326490465 0.330958223 0.336688683 0.347769889 0.352030305 0.355652032 0.360863727 0.362143376 0.364157024 0.384578384 0.407386613 0.414458732 0.430322291 0.431723711 0.435422173 0.451161286 0.464787310 0.475691197 0.478986045 0.480509729 0.486582091 0.498907559 0.503879539 0.515235242 0.518053238 0.543926170 0.566944860 0.567739222 0.586840729 0.591809624 0.605982455 0.644295202 0.645646314 0.668116176 0.675633559 0.687424282 0.703742887 0.704136975 0.704407597 0.711306424 0.717288939 0.734335976 0.738039085 0.739777817 0.747120321 0.750865138 0.771623343 0.775993516 0.809354607 0.821866037 0.824235635 0.828949028 0.834332183 0.848356983 0.849578964 0.851428361 0.854662294 0.863525390 0.867477599 0.875975868 0.887596521 0.891383901 0.892353490 0.893744321 0.902132921 0.910558794 0.918004686 0.922709145 0.924571247 0.932029775 0.936091188 0.956144383 0.962748853 0.965388901 0.970117167 0.977293364 0.982588598 0.998679478 1.013078875 1.016310883 1.021957899 1.040305970 1.055206393 1.071347978 1.073125786 1.080278317 1.087538198 1.108564514 1.110441090 1.118316181 1.119300778 1.122636851 1.123997084 1.141911145 1.149998377 1.161781204 1.170200044 1.177418489 1.188972054 1.200812900 1.222184537 1.234271915 1.258273877 1.296525764 1.299246851 1.314766774 1.326484046 1.327517400 1.330316585 1.331473287 1.334838702 1.342512924 1.349257939 1.369141818 1.380016825 1.381348754 1.381902981 1.429553619 1.513023053 1.557995674 1.684862595 1.922884266</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">297</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91896605" y3="-0.95526097" z3="-0.68002518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.6036999" y3="-1.95142763" z3="-1.54348321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08652042" y3="-0.99682262" z3="-1.40636551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7774861" y3="1.47709736" z3="-1.06187893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28808044" y3="0.31068137" z3="-0.49930395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65846027" y3="2.73741851" z3="-1.15739254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00695976" y3="2.73529257" z3="-0.84722462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37910753" y3="4.99511863" z3="-0.3847783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81036191" y3="3.85252008" z3="-0.8962362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75243289" y3="5.87133765" z3="-0.1908646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09463806" y3="1.61112691" z3="-1.68266997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12652989" y3="0.35773267" z3="0.21626212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71438352" y3="0.38432473" z3="-0.64403796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60830111" y3="0.73524511" z3="0.28156246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66543533" y3="-0.85652465" z3="-1.50754311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09291718" y3="-2.47104888" z3="-1.32533345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01086642" y3="-5.48706884" z3="-6.27966316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74579858" y3="-5.05251478" z3="-5.31158008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05044182" y3="-3.91174737" z3="-2.85356725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7121289" y3="-3.67200566" z3="-5.16459326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46058611" y3="-5.87910773" z3="-4.22198022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12730403" y3="-5.30262677" z3="-3.00271695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37351678" y3="-3.06994461" z3="-3.94229837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94168561" y3="-3.00473834" z3="-5.99899535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51132374" y3="-6.96680555" z3="-4.31559439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94235138" y3="-5.9356592" z3="-2.13070087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64989499" y3="-3.36338811" z3="-1.60830866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34831227" y3="-3.84624669" z3="-0.85993561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69195253" y3="-4.8488913" z3="-1.1276765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3796041" y3="-3.5442347" z3="0.58876681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40553237" y3="-3.06889158" z3="3.34745725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68379356" y3="-4.57915495" z3="1.48165412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10803786" y3="-2.26689113" z3="1.08857931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11782024" y3="-2.03154333" z3="2.4590986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68819521" y3="-4.34362022" z3="2.85532439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87552782" y3="-5.58715287" z3="1.10237549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09802996" y3="-1.42669875" z3="0.42444701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10901968" y3="-1.02365943" z3="2.8171775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8913778" y3="-5.16812287" z3="3.54389902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40237918" y3="-2.8877695" z3="4.42626958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32554692" y3="-1.73412172" z3="-3.91228833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46306435" y3="-1.32910177" z3="-3.01023549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34069954" y3="3.71036565" z3="-1.05841627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13574162" y3="-2.97987105" z3="-1.70656426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92013276" y3="-3.15951363" z3="-0.56302375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10976311" y3="-2.28692361" z3="0.37187737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83773564" y3="-0.72255132" z3="0.63325861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72080793" y3="-0.26113872" z3="-0.94378563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52769909" y3="0.45916155" z3="1.20460918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06043368" y3="-1.06399819" z3="2.00799853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40367556" y3="-4.37101" z3="-0.32963263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11824943" y3="-4.61296795" z3="0.87292438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03167983" y3="0.02494347" z3="-1.75364178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37505184" y3="0.60925921" z3="-0.75497452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35498885" y3="-1.09038545" z3="-1.30595772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64515189" y3="0.56294335" z3="0.5473362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15430218" y3="0.15830605" z3="2.19892076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99841374" y3="1.45464024" z3="1.30591882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52117963" y3="-0.11764984" z3="2.3446491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87465267" y3="-1.73568464" z3="1.68382562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55651395" y3="-1.52190888" z3="2.87761153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05522754" y3="-4.03247876" z3="0.89176707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50583936" y3="-4.35876944" z3="1.75181945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34747714" y3="-5.68694705" z3="0.86620792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2788174" y3="-2.19740211" z3="-0.1736755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13504016" y3="-3.29322803" z3="-1.03692956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49080485" y3="-4.45270512" z3="-0.62238377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99559206" y3="-4.51141435" z3="0.67482332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14462851" y3="-3.45444818" z3="1.56785797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77933818" y3="-2.29722264" z3="1.13458869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49118631" y3="-3.2199073" z3="-2.06775424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34857604" y3="-5.29203955" z3="-1.30383151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25897791" y3="-5.70104324" z3="1.10367605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73867916" y3="-3.53767061" z3="2.57707993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.873408" y3="-1.4506061" z3="1.81611841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49265648" y3="4.02218238" z3="0.02425024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86278731" y3="3.80639586" z3="-0.04149244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39709729" y3="3.27714546" z3="-1.21116595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60310861" y3="2.98896353" z3="-2.31840919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23353676" y3="3.20384189" z3="-2.23346263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05050424" y3="4.39257404" z3="0.95231784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51397994" y3="4.01988222" z3="0.80668624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83162081" y3="2.98517029" z3="-1.26902174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05954091" y3="2.58713419" z3="-3.22375996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40283102" y3="2.95376843" z3="-3.08392488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16661786" y3="-5.91528881" z3="2.29138693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76456115" y3="-6.40159726" z3="0.23928211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31079524" y3="2.69637401" z3="-2.34425529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46219482" y3="3.03089675" z3="-0.22937973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62919509" y3="0.1637265" z3="-2.01609366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95369083" y3="1.41098022" z3="-1.87816562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81134546" y3="0.09232485" z3="-2.80375408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29100959" y3="1.19999831" z3="-3.45758529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32636036" y3="-0.86943163" z3="-2.88979404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19778922" y3="1.13282714" z3="-4.0650867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45896653" y3="2.53198917" z3="-2.59474175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59566195" y3="2.42930992" z3="-3.36020771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92794293" y3="3.48441455" z3="-2.53931169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96254893" y3="3.30415142" z3="-3.90442176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57872348" y3="3.90652811" z3="-0.24920777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75922412" y3="5.05778216" z3="-0.06018127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92657718" y3="3.96080545" z3="0.205164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4415947" y3="5.10694043" z3="0.76165352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55660448" y3="3.07397226" z3="0.11417871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4800842" y3="5.12261214" z3="1.10429372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32486962" y3="6.23375228" z3="0.5057645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63874092" y3="6.26434279" z3="0.90230965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68666983" y3="7.11388617" z3="0.63116439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06230734" y3="7.17250155" z3="1.340146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3560282" y3="-3.9242863" z3="-2.87159339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5367939" y3="-4.96091231" z3="-2.54872886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23021984" y3="-3.59916556" z3="-3.46696655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48254843" y3="-3.9160446" z3="-3.54269125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69873807" y3="-1.59110627" z3="-2.08753581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43605633" y3="-1.11557316" z3="-2.75959016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53337341" y3="-0.93094953" z3="-1.22173112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7500103" y3="-1.63338931" z3="-2.64627627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.919,-.9553,-.68;6.6037,-1.9514,-1.5435;6.0865,-.9968,-1.4064;4.7775,1.4771,-1.0619;4.2881,.3107,-.4993;2.6585,2.7374,-1.1574;4.007,2.7353,-.8472;2.3791,4.9951,-.3848;1.8104,3.8525,-.8962;1.7524,5.8713,-.1909;2.0946,1.6111,-1.6827;3.1265,.3577,.2163;1.7144,.3843,-.644;.6083,.7352,.2816;1.6654,-.8565,-1.5075;1.0929,-2.471,-1.3253;2.0109,-5.4871,-6.2797;1.7458,-5.0525,-5.3116;1.0504,-3.9117,-2.8536;1.7121,-3.672,-5.1646;1.4606,-5.8791,-4.222;1.1273,-5.3026,-3.0027;1.3735,-3.0699,-3.9423;1.9417,-3.0047,-5.999;1.5113,-6.9668,-4.3156;.9424,-5.9357,-2.1307;.6499,-3.3634,-1.6083;-.3483,-3.8462,-.8599;-.692,-4.8489,-1.1277;-.3796,-3.5442,.5888;-.4055,-3.0689,3.3475;-.6838,-4.5792,1.4817;-.108,-2.2669,1.0886;-.1178,-2.0315,2.4591;-.6882,-4.3436,2.8553;-.8755,-5.5872,1.1024;.098,-1.4267,.4244;.109,-1.0237,2.8172;-.8914,-5.1681,3.5439;-.4024,-2.8878,4.4263;1.3255,-1.7341,-3.9123;1.4631,-1.3291,-3.0102;.3407,3.7104,-1.0584;-2.1357,-2.9799,-1.7066;-2.9201,-3.1595,-.563;-3.1098,-2.2869,.3719;-3.8377,-.7226,.6333;-4.7208,-.2611,-.9438;-2.5277,.4592,1.2046;-5.0604,-1.064,2.008;-3.4037,-4.371,-.3296;-4.1182,-4.613,.8729;-4.0317,.0249,-1.7536;-5.3751,.6093,-.755;-5.355,-1.0904,-1.306;-1.6452,.5629,.5473;-2.1543,.1583,2.1989;-2.9984,1.4546,1.3059;-5.5212,-.1176,2.3446;-5.8747,-1.7357,1.6838;-4.5565,-1.5219,2.8776;-5.0552,-4.0325,.8918;-3.5058,-4.3588,1.7518;-4.3475,-5.6869,.8662;4.2788,-2.1974,-.1737;4.135,-3.2932,-1.0369;3.4908,-4.4527,-.6224;2.9956,-4.5114,.6748;3.1446,-3.4544,1.5679;3.7793,-2.2972,1.1346;4.4912,-3.2199,-2.0678;3.3486,-5.292,-1.3038;2.259,-5.701,1.1037;2.7387,-3.5377,2.5771;3.8734,-1.4506,1.8161;-.4927,4.0222,.0243;-1.8628,3.8064,-.0415;-2.3971,3.2771,-1.2112;-1.6031,2.989,-2.3184;-.2335,3.2038,-2.2335;-.0505,4.3926,.9523;-2.514,4.0199,.8067;-3.8316,2.9852,-1.269;-2.0595,2.5871,-3.2238;.4028,2.9538,-3.0839;2.1666,-5.9153,2.2914;1.7646,-6.4016,.2393;-4.3108,2.6964,-2.3443;-4.4622,3.0309,-.2294;6.6292,.1637,-2.0161;5.9537,1.411,-1.8782;7.8113,.0923,-2.8038;8.291,1.2,-3.4576;8.3264,-.8694,-2.8898;9.1978,1.1328,-4.0651;6.459,2.532,-2.5947;7.5957,2.4293,-3.3602;5.9279,3.4844,-2.5393;7.9625,3.3042,-3.9044;4.5787,3.9065,-.2492;3.7592,5.0578,-.0602;5.9266,3.9608,.2052;6.4416,5.1069,.7617;6.5566,3.074,.1142;7.4801,5.1226,1.1043;4.3249,6.2338,.5058;5.6387,6.2643,.9023;3.6867,7.1139,.6312;6.0623,7.1725,1.3401;-2.356,-3.9243,-2.8716;-2.5368,-4.9609,-2.5487;-3.2302,-3.5992,-3.467;-1.4825,-3.916,-3.5427;-1.6987,-1.5911,-2.0875;-2.4361,-1.1156,-2.7596;-1.5334,-.9309,-1.2217;-.75,-1.6334,-2.6463;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930958668</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000176066275 0.000026720551 0.016560068436 0.005198469042</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002555855748 0.001703903832</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057136910 -0.000225837 0.000014556 0.000133791 0.000255252 0.000308865 0.000404647 0.000578374 0.000714605 0.000785521 0.000913211 0.001021349 0.001190158 0.001266150 0.001384840 0.001497685 0.001619231 0.001722999 0.001777192 0.002066780 0.002306549 0.002586572 0.002811052 0.003046848 0.003305491 0.003672955 0.003930832 0.004525207 0.004761387 0.004885442 0.005169738 0.005332686 0.006005639 0.006367367 0.006509666 0.006818949 0.006944013 0.007397948 0.008192867 0.008661573 0.008815956 0.009403854 0.009754146 0.009884691 0.010961687 0.011216167 0.011883275 0.012642292 0.013381246 0.013702510 0.013994221 0.014632954 0.014871393 0.015422186 0.015900299 0.016063561 0.016765614 0.018648742 0.019271077 0.019446956 0.020212677 0.020552297 0.021550009 0.021776462 0.022438525 0.022807561 0.023493379 0.023801267 0.024559967 0.025906836 0.026597020 0.027080708 0.027164540 0.027485280 0.028392043 0.028817235 0.029818700 0.031050775 0.031582996 0.034246989 0.034807422 0.036032756 0.039080934 0.039633958 0.042004744 0.045444630 0.046132819 0.046738547 0.048862655 0.049700478 0.050093296 0.050839056 0.051552384 0.052211204 0.052291063 0.052416712 0.053025112 0.053645020 0.055001754 0.056116489 0.056450600 0.056724319 0.057017707 0.057093175 0.057810050 0.058637507 0.059279162 0.059791845 0.061352988 0.062169852 0.062979974 0.064344448 0.064585961 0.065128290 0.066050326 0.067574057 0.067861206 0.069026042 0.070505973 0.071528890 0.072250803 0.072645417 0.072996077 0.073073180 0.078687092 0.080464403 0.081932724 0.082605859 0.083527283 0.084626843 0.089090344 0.089464981 0.089828344 0.091345814 0.093335802 0.094585108 0.095501989 0.096301303 0.096873799 0.098573533 0.100193301 0.100708261 0.102818874 0.104007133 0.104725310 0.106937557 0.109411309 0.111101220 0.112447182 0.112889902 0.114020360 0.114882595 0.117024919 0.117451558 0.118639086 0.119198794 0.120691629 0.122238730 0.125099080 0.125866292 0.128685216 0.129064396 0.131080869 0.133894781 0.136894534 0.137902128 0.138615926 0.139729309 0.140423227 0.143433087 0.144578185 0.145902821 0.146818817 0.152010613 0.153609306 0.154133088 0.159639620 0.160848135 0.168577622 0.171469548 0.176516090 0.179181639 0.181647483 0.184539337 0.189196856 0.190654684 0.191993239 0.201378458 0.202250410 0.206355580 0.206969703 0.207271426 0.212505824 0.212755455 0.215642006 0.217024540 0.220432960 0.220941912 0.224626106 0.225151541 0.227205909 0.231914972 0.234610969 0.236247029 0.238588785 0.246323060 0.248464789 0.252742420 0.256589705 0.257239878 0.258354089 0.262582286 0.271597271 0.282931363 0.292048791 0.300147597 0.300268654 0.301124917 0.307190103 0.307805719 0.309861820 0.319988736 0.321401969 0.326494499 0.330966819 0.336688934 0.347770826 0.352030314 0.355652292 0.360866610 0.362150415 0.364157254 0.384578846 0.407406130 0.414459602 0.430323917 0.431723637 0.435424451 0.451162256 0.464788954 0.475695625 0.478994698 0.480510881 0.486593858 0.498907659 0.503880450 0.515239122 0.518054269 0.543938066 0.566945261 0.567739218 0.586843635 0.591809386 0.605998096 0.644297267 0.645661172 0.668118971 0.675636972 0.687424617 0.703744100 0.704137139 0.704408181 0.711313626 0.717291176 0.734345497 0.738039927 0.739778601 0.747125504 0.750866747 0.771623964 0.775993839 0.809361956 0.821867633 0.824250005 0.828950029 0.834335148 0.848366753 0.849581114 0.851428442 0.854663663 0.863525431 0.867477603 0.875979786 0.887597654 0.891384637 0.892355771 0.893750517 0.902133539 0.910576495 0.918005331 0.922717736 0.924571704 0.932030696 0.936094262 0.956147027 0.962753389 0.965389752 0.970117458 0.977293196 0.982589932 0.998682116 1.013085241 1.016311945 1.021960374 1.040310117 1.055217892 1.071351280 1.073126087 1.080302761 1.087546994 1.108567064 1.110441164 1.118316909 1.119306798 1.122636886 1.123998108 1.141912750 1.150018853 1.161781697 1.170200159 1.177427620 1.188995426 1.200816127 1.222184659 1.234282808 1.258278914 1.296529131 1.299298024 1.314770449 1.326484091 1.327517531 1.330324115 1.331475938 1.334841449 1.342518254 1.349259204 1.369167197 1.380016972 1.381349459 1.381907997 1.429554536 1.513026198 1.557995961 1.684864216 1.922884116</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">298</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91651898" y3="-0.95537233" z3="-0.68091957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60328739" y3="-1.95138735" z3="-1.54048507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08571568" y3="-0.99682768" z3="-1.40457208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.7760033" y3="1.4770469" z3="-1.06234364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28518216" y3="0.31045713" z3="-0.50129738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65773444" y3="2.73891625" z3="-1.15908973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00595697" y3="2.73555574" z3="-0.84775788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37978622" y3="4.99659675" z3="-0.38564307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81039251" y3="3.85450487" z3="-0.89742759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75396413" y3="5.87290148" z3="-0.19382446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09363045" y3="1.61358524" z3="-1.68633036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12248608" y3="0.35723581" z3="0.21236541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71134215" y3="0.38586965" z3="-0.6495724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60459599" y3="0.73706666" z3="0.27516492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6621521" y3="-0.85430319" z3="-1.51405946">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09152422" y3="-2.46996726" z3="-1.32905101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99701105" y3="-5.48780852" z3="-6.28514774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73553438" y3="-5.05314036" z3="-5.31614077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0482649" y3="-3.91216545" z3="-2.85594481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70026253" y3="-3.67263472" z3="-5.16976412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45650062" y3="-5.87959682" z3="-4.22482752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12720569" y3="-5.30297761" z3="-3.00457005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36587372" y3="-3.07041709" z3="-3.94635272">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92512554" y3="-3.00545536" z3="-6.00551745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50877236" y3="-6.96725563" z3="-4.31802972">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94657425" y3="-5.93579994" z3="-2.13147348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65018763" y3="-3.36437556" z3="-1.60955508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34616849" y3="-3.84754151" z3="-0.85965534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6881992" y3="-4.8513558" z3="-1.12525738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37627001" y3="-3.54263967" z3="0.5884603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39665551" y3="-3.06136211" z3="3.34625437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67501062" y3="-4.57652073" z3="1.484418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10742058" y3="-2.26368457" z3="1.08485572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11457859" y3="-2.02506838" z3="2.45481655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6764043" y3="-4.33808689" z3="2.857688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86381926" y3="-5.58659586" z3="1.10823716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09423438" y3="-1.42443361" z3="0.41800844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10965996" y3="-1.01549285" z3="2.80986425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87557463" y3="-5.16154563" z3="3.54830869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39123048" y3="-2.87788033" z3="4.42470736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31621514" y3="-1.73460818" z3="-3.9170664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45590127" y3="-1.32863505" z3="-3.01569596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34050306" y3="3.71360892" z3="-1.05853861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1377913" y3="-2.98674348" z3="-1.70621051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91972861" y3="-3.16398299" z3="-0.56043461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1101158" y3="-2.28888763" z3="0.37175178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83717648" y3="-0.72290927" z3="0.62857417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71407813" y3="-0.25822517" z3="-0.95119733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52725008" y3="0.45632657" z3="1.2050898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0674998" y3="-1.06239208" z3="1.9970727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39963111" y3="-4.37609605" z3="-0.3213081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1101835" y3="-4.61548905" z3="0.88423267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02287064" y3="0.03225547" z3="-1.75770613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37112667" y3="0.60987881" z3="-0.76132326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34534141" y3="-1.08750208" z3="-1.31845681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63800662" y3="0.552214" z3="0.55548942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1654496" y3="0.15991463" z3="2.20530375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99476569" y3="1.45429714" z3="1.29596835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52937093" y3="-0.11514355" z3="2.32975835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88062823" y3="-1.73351753" z3="1.66856742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56952562" y3="-1.51990981" z3="2.87027258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04765586" y3="-4.03605007" z3="0.90437766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49515605" y3="-4.35739136" z3="1.76050575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33805602" y3="-5.68960055" z3="0.88119961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27632198" y3="-2.19769785" z3="-0.17514648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13393134" y3="-3.29370471" z3="-1.03837873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49123863" y3="-4.45399608" z3="-0.62372592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99654182" y3="-4.51350404" z3="0.67362513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14375542" y3="-3.45610378" z3="1.56647848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77652279" y3="-2.29781007" z3="1.13296028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49010449" y3="-3.21988399" z3="-2.06912571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34927219" y3="-5.29278848" z3="-1.30529451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26188618" y3="-5.70414682" z3="1.10260858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73764134" y3="-3.53957913" z3="2.57563205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86884619" y3="-1.45047913" z3="1.81419279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4909083" y3="4.02466021" z3="0.02581585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86132426" y3="3.80990545" z3="-0.03769633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39801893" y3="3.28297733" z3="-1.20738111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6061491" y3="2.99613115" z3="-2.31653133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23606911" y3="3.20935483" z3="-2.23339623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04690184" y3="4.39348133" z3="0.95367354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51088534" y3="4.02265133" z3="0.81191818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83295331" y3="2.99238768" z3="-1.26333492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06455056" y3="2.59631128" z3="-3.22181774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3986791" y3="2.95994267" z3="-3.08508214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17075109" y3="-5.91888638" z3="2.29026442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76764547" y3="-6.40505199" z3="0.23838587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31560196" y3="2.71193447" z3="-2.33921947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46030018" y3="3.0307574" z3="-0.22135193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62999187" y3="0.16388818" z3="-2.01250598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95415786" y3="1.41109022" z3="-1.87588274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81460447" y3="0.09283239" z3="-2.79646432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29653919" y3="1.20089253" z3="-3.44795623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32986307" y3="-0.86889644" z3="-2.88133239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20541288" y3="1.13409618" z3="-4.05234578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46168378" y3="2.53241461" z3="-2.59039108">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60088847" y3="2.43015466" z3="-3.35214778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93059219" y3="3.48486807" z3="-2.53611757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96964206" y3="3.30533707" z3="-3.8945512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57799476" y3="3.90590056" z3="-0.24823028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75956821" y3="5.05806993" z3="-0.05991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92531827" y3="3.95838506" z3="0.20809614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4409889" y3="5.10375292" z3="0.76551978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55453232" y3="3.07066369" z3="0.11737144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47904837" y3="5.11794119" z3="1.109711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32602565" y3="6.23337422" z3="0.50656473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63942284" y3="6.2622402" z3="0.90495521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68880654" y3="7.11438535" z3="0.63101618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0636099" y3="7.16986729" z3="1.3432447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35850499" y3="-3.93608725" z3="-2.86742644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53570574" y3="-4.97218329" z3="-2.53980807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23476194" y3="-3.61507231" z3="-3.46148431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48679402" y3="-3.9280467" z3="-3.54090171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70389513" y3="-1.59869465" z3="-2.09229498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44190145" y3="-1.12794059" z3="-2.76656696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54082649" y3="-0.93453795" z3="-1.22903749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75447312" y3="-1.64034662" z3="-2.65000134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9165,-.9554,-.6809;6.6033,-1.9514,-1.5405;6.0857,-.9968,-1.4046;4.776,1.477,-1.0623;4.2852,.3105,-.5013;2.6577,2.7389,-1.1591;4.006,2.7356,-.8478;2.3798,4.9966,-.3856;1.8104,3.8545,-.8974;1.754,5.8729,-.1938;2.0936,1.6136,-1.6863;3.1225,.3572,.2124;1.7113,.3859,-.6496;.6046,.7371,.2752;1.6622,-.8543,-1.5141;1.0915,-2.47,-1.3291;1.997,-5.4878,-6.2851;1.7355,-5.0531,-5.3161;1.0483,-3.9122,-2.8559;1.7003,-3.6726,-5.1698;1.4565,-5.8796,-4.2248;1.1272,-5.303,-3.0046;1.3659,-3.0704,-3.9464;1.9251,-3.0055,-6.0055;1.5088,-6.9673,-4.318;.9466,-5.9358,-2.1315;.6502,-3.3644,-1.6096;-.3462,-3.8475,-.8597;-.6882,-4.8514,-1.1253;-.3763,-3.5426,.5885;-.3967,-3.0614,3.3463;-.675,-4.5765,1.4844;-.1074,-2.2637,1.0849;-.1146,-2.0251,2.4548;-.6764,-4.3381,2.8577;-.8638,-5.5866,1.1082;.0942,-1.4244,.418;.1097,-1.0155,2.8099;-.8756,-5.1615,3.5483;-.3912,-2.8779,4.4247;1.3162,-1.7346,-3.9171;1.4559,-1.3286,-3.0157;.3405,3.7136,-1.0585;-2.1378,-2.9867,-1.7062;-2.9197,-3.164,-.5604;-3.1101,-2.2889,.3718;-3.8372,-.7229,.6286;-4.7141,-.2582,-.9512;-2.5273,.4563,1.2051;-5.0675,-1.0624,1.9971;-3.3996,-4.3761,-.3213;-4.1102,-4.6155,.8842;-4.0229,.0323,-1.7577;-5.3711,.6099,-.7613;-5.3453,-1.0875,-1.3185;-1.638,.5522,.5555;-2.1654,.1599,2.2053;-2.9948,1.4543,1.296;-5.5294,-.1151,2.3298;-5.8806,-1.7335,1.6686;-4.5695,-1.5199,2.8703;-5.0477,-4.0361,.9044;-3.4952,-4.3574,1.7605;-4.3381,-5.6896,.8812;4.2763,-2.1977,-.1751;4.1339,-3.2937,-1.0384;3.4912,-4.454,-.6237;2.9965,-4.5135,.6736;3.1438,-3.4561,1.5665;3.7765,-2.2978,1.133;4.4901,-3.2199,-2.0691;3.3493,-5.2928,-1.3053;2.2619,-5.7041,1.1026;2.7376,-3.5396,2.5756;3.8688,-1.4505,1.8142;-.4909,4.0247,.0258;-1.8613,3.8099,-.0377;-2.398,3.283,-1.2074;-1.6061,2.9961,-2.3165;-.2361,3.2094,-2.2334;-.0469,4.3935,.9537;-2.5109,4.0227,.8119;-3.833,2.9924,-1.2633;-2.0646,2.5963,-3.2218;.3987,2.9599,-3.0851;2.1708,-5.9189,2.2903;1.7676,-6.4051,.2384;-4.3156,2.7119,-2.3392;-4.4603,3.0308,-.2214;6.63,.1639,-2.0125;5.9542,1.4111,-1.8759;7.8146,.0928,-2.7965;8.2965,1.2009,-3.448;8.3299,-.8689,-2.8813;9.2054,1.1341,-4.0523;6.4617,2.5324,-2.5904;7.6009,2.4302,-3.3521;5.9306,3.4849,-2.5361;7.9696,3.3053,-3.8946;4.578,3.9059,-.2482;3.7596,5.0581,-.0599;5.9253,3.9584,.2081;6.441,5.1038,.7655;6.5545,3.0707,.1174;7.479,5.1179,1.1097;4.326,6.2334,.5066;5.6394,6.2622,.905;3.6888,7.1144,.631;6.0636,7.1699,1.3432;-2.3585,-3.9361,-2.8674;-2.5357,-4.9722,-2.5398;-3.2348,-3.6151,-3.4615;-1.4868,-3.928,-3.5409;-1.7039,-1.5987,-2.0923;-2.4419,-1.1279,-2.7666;-1.5408,-.9345,-1.229;-.7545,-1.6403,-2.65;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926991914</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000903545175 0.000142684682 0.020120954101 0.005453461393</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057136431 -0.000210609 0.000015004 0.000090361 0.000226744 0.000358820 0.000401101 0.000582201 0.000719995 0.000787106 0.000914911 0.001021994 0.001191084 0.001264132 0.001384737 0.001498256 0.001618466 0.001722735 0.001777394 0.002068676 0.002306548 0.002586611 0.002811118 0.003046723 0.003305531 0.003673768 0.003931021 0.004524598 0.004762068 0.004885861 0.005170337 0.005333099 0.006007037 0.006367539 0.006509417 0.006819647 0.006942049 0.007397522 0.008192980 0.008661605 0.008816113 0.009403910 0.009755953 0.009885981 0.010961699 0.011218208 0.011883275 0.012642711 0.013381607 0.013704772 0.013994342 0.014632852 0.014871785 0.015422766 0.015900382 0.016066633 0.016772496 0.018648813 0.019271211 0.019447348 0.020214910 0.020555748 0.021550468 0.021779752 0.022442224 0.022808549 0.023493617 0.023801425 0.024562816 0.025907383 0.026600292 0.027092819 0.027177366 0.027493666 0.028401949 0.028817742 0.029816178 0.031053524 0.031582911 0.034249255 0.034808471 0.036032992 0.039082333 0.039647234 0.042005268 0.045447455 0.046132877 0.046735909 0.048864162 0.049700485 0.050093339 0.050839300 0.051552681 0.052213365 0.052291401 0.052416709 0.053025896 0.053645590 0.055001929 0.056117798 0.056451178 0.056724639 0.057018094 0.057091973 0.057813470 0.058639507 0.059279060 0.059794576 0.061353460 0.062170534 0.062982400 0.064345581 0.064586084 0.065131017 0.066051699 0.067574916 0.067866992 0.069026427 0.070505833 0.071528993 0.072251551 0.072645582 0.073000762 0.073079936 0.078689296 0.080467286 0.081934527 0.082608738 0.083527476 0.084635345 0.089099909 0.089467963 0.089828664 0.091346373 0.093337050 0.094585089 0.095502013 0.096301163 0.096874278 0.098573541 0.100195465 0.100708468 0.102819756 0.104007541 0.104737817 0.106942181 0.109434004 0.111103128 0.112465465 0.112892214 0.114022612 0.114896352 0.117024926 0.117451843 0.118639260 0.119198981 0.120691670 0.122238628 0.125099281 0.125866825 0.128697990 0.129064169 0.131080908 0.133895707 0.136914334 0.137909445 0.138616651 0.139735066 0.140424244 0.143432906 0.144578630 0.145903065 0.146818677 0.152010634 0.153609281 0.154134470 0.159639459 0.160847822 0.168577623 0.171470594 0.176550916 0.179191859 0.181648136 0.184539237 0.189204197 0.190684860 0.191993672 0.201380153 0.202251942 0.206359159 0.206969976 0.207271892 0.212507653 0.212782977 0.215642627 0.217024541 0.220432797 0.220943622 0.224629013 0.225151672 0.227207003 0.231915738 0.234611562 0.236253630 0.238588789 0.246324856 0.248465001 0.252750391 0.256594719 0.257241260 0.258355179 0.262583830 0.271599078 0.282931427 0.292050428 0.300148198 0.300270171 0.301127499 0.307195239 0.307807226 0.309862981 0.319989762 0.321405630 0.326499342 0.330969984 0.336689014 0.347771586 0.352030414 0.355652580 0.360873979 0.362154789 0.364157375 0.384579881 0.407439081 0.414459565 0.430329291 0.431729663 0.435431646 0.451162858 0.464789227 0.475697524 0.479006282 0.480510898 0.486609182 0.498907666 0.503881376 0.515246908 0.518057690 0.543957060 0.566945511 0.567739374 0.586854062 0.591808719 0.606020527 0.644300717 0.645686626 0.668125752 0.675641873 0.687424738 0.703743904 0.704139848 0.704413086 0.711341980 0.717294772 0.734348844 0.738041178 0.739779664 0.747129399 0.750870159 0.771624919 0.775994139 0.809376979 0.821870253 0.824264024 0.828951790 0.834340508 0.848376846 0.849583442 0.851428380 0.854669601 0.863525747 0.867477672 0.875987848 0.887598175 0.891385092 0.892357187 0.893764207 0.902134788 0.910605086 0.918005523 0.922729934 0.924572236 0.932032072 0.936103121 0.956149451 0.962765592 0.965394981 0.970118457 0.977291792 0.982590507 0.998686543 1.013099110 1.016312287 1.021965583 1.040316898 1.055239728 1.071363234 1.073126254 1.080370442 1.087564998 1.108568077 1.110441454 1.118317389 1.119310398 1.122637122 1.124002596 1.141916599 1.150038135 1.161782174 1.170200174 1.177447813 1.189017477 1.200821848 1.222185955 1.234288294 1.258282688 1.296531165 1.299393627 1.314772732 1.326484342 1.327517431 1.330335167 1.331480132 1.334842996 1.342540476 1.349260632 1.369181776 1.380017005 1.381350521 1.381911691 1.429557135 1.513023543 1.557997514 1.684865480 1.922883422</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">299</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9091646" y3="-0.957469" z3="-0.68218769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59305973" y3="-1.95552631" z3="-1.54509388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07714742" y3="-1.00027343" z3="-1.40782336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77271776" y3="1.47552438" z3="-1.06141155">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28042722" y3="0.30941706" z3="-0.50064022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65709073" y3="2.74159467" z3="-1.15620048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00538136" y3="2.73534273" z3="-0.84529586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3833634" y3="4.99891215" z3="-0.38063194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.81180099" y3="3.8585972" z3="-0.89401962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75859939" y3="5.87671048" z3="-0.18373167">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09052928" y3="1.61742141" z3="-1.68304782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1186499" y3="0.3580711" z3="0.21440428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70672737" y3="0.39037949" z3="-0.64605373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60170355" y3="0.74324719" z3="0.28006594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65418767" y3="-0.84909717" z3="-1.5113267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.08924843" y3="-2.46502267" z3="-1.3284005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.017132" y3="-5.48049139" z3="-6.28070136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75033644" y3="-5.0464303" z3="-5.3128493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05074951" y3="-3.907018" z3="-2.85544828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71082971" y3="-3.66595902" z3="-5.16678031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46873163" y3="-5.87352836" z3="-4.22267759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13315794" y3="-5.29771438" z3="-3.00368773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37005659" y3="-3.06454191" z3="-3.94476741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93737345" y3="-2.99820343" z3="-6.00160566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52402103" y3="-6.96107071" z3="-4.31568655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95090313" y3="-5.93114437" z3="-2.13135991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6489387" y3="-3.3586815" z3="-1.61062768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34489297" y3="-3.84577829" z3="-0.85885353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68459292" y3="-4.85050955" z3="-1.1234883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37423131" y3="-3.53942966" z3="0.58887073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.38979024" y3="-3.05446346" z3="3.34561667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.66520967" y3="-4.57381524" z3="1.48662271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1115818" y3="-2.25767935" z3="1.08268673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1159689" y3="-2.01752706" z3="2.45229302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.66424017" y3="-4.33337017" z3="2.8594733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.85101033" y3="-5.58409435" z3="1.11156483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.08448507" y3="-1.41864146" z3="0.41432455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10421417" y3="-1.00646561" z3="2.80538671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.85607596" y3="-5.15748057" z3="3.55221817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.38233255" y3="-2.8696572" z3="4.42375013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31655851" y3="-1.72893002" z3="-3.91550339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.45290065" y3="-1.32270065" z3="-3.01387239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.341745" y3="3.71948144" z3="-1.0565992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13944146" y3="-2.99070314" z3="-1.70591353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91978556" y3="-3.16637099" z3="-0.55922382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11232981" y3="-2.28740695" z3="0.36930129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.84255229" y3="-0.72347261" z3="0.62487334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71935392" y3="-0.26014435" z3="-0.95511229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53443741" y3="0.45753178" z3="1.20189908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07221084" y3="-1.06464976" z3="1.99353287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39633857" y3="-4.37848542" z3="-0.31578329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10228575" y3="-4.61637838" z3="0.89260644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02773426" y3="0.02648166" z3="-1.76261396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37269839" y3="0.6109587" z3="-0.76619004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35389352" y3="-1.08767368" z3="-1.32045063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64847205" y3="0.55983695" z3="0.54898505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16690432" y3="0.15684376" z3="2.19828818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00423165" y3="1.45373033" z3="1.30005327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53084937" y3="-0.11792098" z3="2.33207394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88741633" y3="-1.73191199" z3="1.66302078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57386207" y3="-1.52794549" z3="2.86351082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0401157" y3="-4.03745316" z3="0.91586283">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.4843962" y3="-4.35806146" z3="1.76621908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3292925" y3="-5.69104479" z3="0.89212747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.26877696" y3="-2.19968668" z3="-0.17641176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.12990849" y3="-3.29687404" z3="-1.03877999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49013426" y3="-4.45857746" z3="-0.62371263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99409325" y3="-4.5180955" z3="0.67311626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.13696882" y3="-3.45925892" z3="1.56492622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.76725995" y3="-2.29984435" z3="1.13110686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.48722849" y3="-3.22353689" z3="-2.06919447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35300974" y3="-5.29993021" z3="-1.30420616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26364143" y3="-5.71133531" z3="1.10270101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73003832" y3="-3.54312209" z3="2.57372853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8570757" y3="-1.45234647" z3="1.81184071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49113167" y3="4.0263072" z3="0.02788508">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86130158" y3="3.8106589" z3="-0.03833117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39604169" y3="3.28690264" z3="-1.21025473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60254694" y3="3.00452689" z3="-2.31936874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23296386" y3="3.21904684" z3="-2.23395782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04851752" y3="4.39217313" z3="0.95752775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51216435" y3="4.01995832" z3="0.81118376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83049262" y3="2.99450743" z3="-1.26860573">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05936362" y3="2.60729231" z3="-3.22653062">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40306834" y3="2.97338029" z3="-3.0861979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17484025" y3="-5.9271674" z3="2.29047656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77002025" y3="-6.41305754" z3="0.23873055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31031483" y3="2.71212195" z3="-2.34518494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46045625" y3="3.03397914" z3="-0.22830924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62224773" y3="0.15974402" z3="-2.01622385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94914536" y3="1.40810305" z3="-1.87721475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80462607" y3="0.08684176" z3="-2.80333753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28684147" y3="1.19430927" z3="-3.45560294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31769207" y3="-0.87585992" z3="-2.89021814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19376258" y3="1.12604302" z3="-4.06271172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45706191" y3="2.52894709" z3="-2.5921739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59394094" y3="2.42488829" z3="-3.35711328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92796239" y3="3.48235431" z3="-2.53593057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96290432" y3="3.29964922" z3="-3.90003755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.58013069" y3="3.90422067" z3="-0.24552787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76366898" y3="5.05738633" z3="-0.05550975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92776544" y3="3.95428136" z3="0.2097934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4456488" y3="5.09834513" z3="0.76781215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55522647" y3="3.0659708" z3="0.11898971">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48390307" y3="5.1107935" z3="1.11112284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33215177" y3="6.2310833" z3="0.5123331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64591554" y3="6.2577109" z3="0.90941725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69622101" y3="7.11273381" z3="0.63878997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07168805" y3="7.16417086" z3="1.3486389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35763593" y3="-3.94386358" z3="-2.86418724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53530963" y3="-4.97854613" z3="-2.53421715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.2334229" y3="-3.62583981" z3="-3.46145703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48473785" y3="-3.93794618" z3="-3.53607409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70916009" y3="-1.60235329" z3="-2.09681846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44810888" y3="-1.13533596" z3="-2.77321624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.54814545" y3="-0.93532352" z3="-1.23548469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75949354" y3="-1.64360871" z3="-2.65402827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9092,-.9575,-.6822;6.5931,-1.9555,-1.5451;6.0771,-1.0003,-1.4078;4.7727,1.4755,-1.0614;4.2804,.3094,-.5006;2.6571,2.7416,-1.1562;4.0054,2.7353,-.8453;2.3834,4.9989,-.3806;1.8118,3.8586,-.894;1.7586,5.8767,-.1837;2.0905,1.6174,-1.683;3.1186,.3581,.2144;1.7067,.3904,-.6461;.6017,.7432,.2801;1.6542,-.8491,-1.5113;1.0892,-2.465,-1.3284;2.0171,-5.4805,-6.2807;1.7503,-5.0464,-5.3128;1.0507,-3.907,-2.8554;1.7108,-3.666,-5.1668;1.4687,-5.8735,-4.2227;1.1332,-5.2977,-3.0037;1.3701,-3.0645,-3.9448;1.9374,-2.9982,-6.0016;1.524,-6.9611,-4.3157;.9509,-5.9311,-2.1314;.6489,-3.3587,-1.6106;-.3449,-3.8458,-.8589;-.6846,-4.8505,-1.1235;-.3742,-3.5394,.5889;-.3898,-3.0545,3.3456;-.6652,-4.5738,1.4866;-.1116,-2.2577,1.0827;-.116,-2.0175,2.4523;-.6642,-4.3334,2.8595;-.851,-5.5841,1.1116;.0845,-1.4186,.4143;.1042,-1.0065,2.8054;-.8561,-5.1575,3.5522;-.3823,-2.8697,4.4238;1.3166,-1.7289,-3.9155;1.4529,-1.3227,-3.0139;.3417,3.7195,-1.0566;-2.1394,-2.9907,-1.7059;-2.9198,-3.1664,-.5592;-3.1123,-2.2874,.3693;-3.8426,-.7235,.6249;-4.7194,-.2601,-.9551;-2.5344,.4575,1.2019;-5.0722,-1.0646,1.9935;-3.3963,-4.3785,-.3158;-4.1023,-4.6164,.8926;-4.0277,.0265,-1.7626;-5.3727,.611,-.7662;-5.3539,-1.0877,-1.3205;-1.6485,.5598,.549;-2.1669,.1568,2.1983;-3.0042,1.4537,1.3001;-5.5308,-.1179,2.3321;-5.8874,-1.7319,1.663;-4.5739,-1.5279,2.8635;-5.0401,-4.0375,.9159;-3.4844,-4.3581,1.7662;-4.3293,-5.691,.8921;4.2688,-2.1997,-.1764;4.1299,-3.2969,-1.0388;3.4901,-4.4586,-.6237;2.9941,-4.5181,.6731;3.137,-3.4593,1.5649;3.7673,-2.2998,1.1311;4.4872,-3.2235,-2.0692;3.353,-5.2999,-1.3042;2.2636,-5.7113,1.1027;2.73,-3.5431,2.5737;3.8571,-1.4523,1.8118;-.4911,4.0263,.0279;-1.8613,3.8107,-.0383;-2.396,3.2869,-1.2103;-1.6025,3.0045,-2.3194;-.233,3.219,-2.234;-.0485,4.3922,.9575;-2.5122,4.02,.8112;-3.8305,2.9945,-1.2686;-2.0594,2.6073,-3.2265;.4031,2.9734,-3.0862;2.1748,-5.9272,2.2905;1.77,-6.4131,.2387;-4.3103,2.7121,-2.3452;-4.4605,3.034,-.2283;6.6222,.1597,-2.0162;5.9491,1.4081,-1.8772;7.8046,.0868,-2.8033;8.2868,1.1943,-3.4556;8.3177,-.8759,-2.8902;9.1938,1.126,-4.0627;6.4571,2.5289,-2.5922;7.5939,2.4249,-3.3571;5.928,3.4824,-2.5359;7.9629,3.2996,-3.9;4.5801,3.9042,-.2455;3.7637,5.0574,-.0555;5.9278,3.9543,.2098;6.4456,5.0983,.7678;6.5552,3.066,.119;7.4839,5.1108,1.1111;4.3322,6.2311,.5123;5.6459,6.2577,.9094;3.6962,7.1127,.6388;6.0717,7.1642,1.3486;-2.3576,-3.9439,-2.8642;-2.5353,-4.9785,-2.5342;-3.2334,-3.6258,-3.4615;-1.4847,-3.9379,-3.5361;-1.7092,-1.6024,-2.0968;-2.4481,-1.1353,-2.7732;-1.5481,-.9353,-1.2355;-.7595,-1.6436,-2.654;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662921211211</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.001187385652 0.000179248542 0.018832565452 0.005344464429</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057136272 -0.000077839 0.000048734 0.000149039 0.000229571 0.000347477 0.000410527 0.000583328 0.000720016 0.000791985 0.000915987 0.001022077 0.001191185 0.001264856 0.001384695 0.001498199 0.001618306 0.001723426 0.001778148 0.002068100 0.002309338 0.002586586 0.002811327 0.003048955 0.003306043 0.003673772 0.003931077 0.004525614 0.004762522 0.004885910 0.005171318 0.005333189 0.006008060 0.006367362 0.006511064 0.006819884 0.006942200 0.007397611 0.008192956 0.008661421 0.008815993 0.009404812 0.009756541 0.009887152 0.010961705 0.011218735 0.011883821 0.012642934 0.013382965 0.013704580 0.013994436 0.014632844 0.014871782 0.015422969 0.015900717 0.016070959 0.016775974 0.018648855 0.019271467 0.019447591 0.020216534 0.020558173 0.021551305 0.021780916 0.022444285 0.022808591 0.023494154 0.023801349 0.024564434 0.025907608 0.026601455 0.027101093 0.027191170 0.027501499 0.028412240 0.028818974 0.029816126 0.031054073 0.031582805 0.034250023 0.034808833 0.036033031 0.039083839 0.039655717 0.042005805 0.045448683 0.046132895 0.046736267 0.048865237 0.049700536 0.050093780 0.050839292 0.051553129 0.052215092 0.052291666 0.052416730 0.053026858 0.053645875 0.055002526 0.056118048 0.056451838 0.056724600 0.057018014 0.057093196 0.057815890 0.058641971 0.059279419 0.059795660 0.061353469 0.062170530 0.062984791 0.064346726 0.064586323 0.065133214 0.066052200 0.067577047 0.067868420 0.069027145 0.070505958 0.071529206 0.072251469 0.072645489 0.073004958 0.073081426 0.078690259 0.080468342 0.081935395 0.082615430 0.083527658 0.084639256 0.089106294 0.089471205 0.089828849 0.091346134 0.093338252 0.094584991 0.095502296 0.096301425 0.096874287 0.098573524 0.100195401 0.100708557 0.102819946 0.104007384 0.104743841 0.106948000 0.109459783 0.111104101 0.112479385 0.112895522 0.114023854 0.114907193 0.117024973 0.117451992 0.118639110 0.119199027 0.120691717 0.122239588 0.125099342 0.125866808 0.128708831 0.129064230 0.131081774 0.133895839 0.136928695 0.137916541 0.138619147 0.139736478 0.140424520 0.143433428 0.144578818 0.145903267 0.146818529 0.152010672 0.153607803 0.154135763 0.159639717 0.160848380 0.168578066 0.171472190 0.176577152 0.179198708 0.181649463 0.184539069 0.189208840 0.190706926 0.191994378 0.201382085 0.202253641 0.206361207 0.206970038 0.207272377 0.212508522 0.212809611 0.215642767 0.217024557 0.220433106 0.220944777 0.224629724 0.225152003 0.227207608 0.231916402 0.234612170 0.236258897 0.238588913 0.246326715 0.248466712 0.252758887 0.256599251 0.257242693 0.258356026 0.262585395 0.271600752 0.282931418 0.292052549 0.300148972 0.300271501 0.301129407 0.307198739 0.307808582 0.309863565 0.319993625 0.321408028 0.326504201 0.330973877 0.336689058 0.347772346 0.352030920 0.355652996 0.360879789 0.362158997 0.364157445 0.384580332 0.407466443 0.414460064 0.430331232 0.431730193 0.435438913 0.451163894 0.464790235 0.475700637 0.479012978 0.480511023 0.486628406 0.498907667 0.503881926 0.515255034 0.518060685 0.543973283 0.566945999 0.567739522 0.586866226 0.591809058 0.606041187 0.644301694 0.645711891 0.668131871 0.675646978 0.687424981 0.703745500 0.704142446 0.704418166 0.711381577 0.717299006 0.734354297 0.738042261 0.739779990 0.747130076 0.750873423 0.771625947 0.775994446 0.809389495 0.821872672 0.824278380 0.828953965 0.834344189 0.848388460 0.849586787 0.851428386 0.854679116 0.863526142 0.867477784 0.875994923 0.887598842 0.891385857 0.892358917 0.893771135 0.902136829 0.910624722 0.918006122 0.922737269 0.924572805 0.932033526 0.936118533 0.956153281 0.962768893 0.965399912 0.970120368 0.977292302 0.982591341 0.998691437 1.013104339 1.016313054 1.021970360 1.040322465 1.055263905 1.071377926 1.073127431 1.080442141 1.087581564 1.108568551 1.110441812 1.118318335 1.119312447 1.122637557 1.124006903 1.141921107 1.150062926 1.161782480 1.170200181 1.177468282 1.189039583 1.200827514 1.222187022 1.234293145 1.258289214 1.296533876 1.299507253 1.314775935 1.326484330 1.327517366 1.330344360 1.331480988 1.334844474 1.342557274 1.349260926 1.369202548 1.380017520 1.381350490 1.381917268 1.429559102 1.513025493 1.557998939 1.684867511 1.922885374</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">300</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91224075" y3="-0.95631069" z3="-0.68614329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59505343" y3="-1.95302024" z3="-1.55280823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07859657" y3="-0.99820743" z3="-1.41448316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77277517" y3="1.47654015" z3="-1.06551208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28263862" y3="0.3100456" z3="-0.50373078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65578973" y3="2.74053315" z3="-1.15511279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00467993" y3="2.73553944" z3="-0.84701747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38088612" y3="4.99615214" z3="-0.37466469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80979232" y3="3.85605888" z3="-0.88903655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75583738" y3="5.87232525" z3="-0.1778412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08967942" y3="1.61625288" z3="-1.68248998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12197412" y3="0.35784176" z3="0.21316735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70873592" y3="0.38846843" z3="-0.64533527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6046364" y3="0.74034415" z3="0.28226348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65620985" y3="-0.85131904" z3="-1.51009803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09129748" y3="-2.46884208" z3="-1.32643858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02381431" y3="-5.49246011" z3="-6.27303382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7559227" y3="-5.05680621" z3="-5.30622079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05387975" y3="-3.91325477" z3="-2.85132437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71964919" y3="-3.6761726" z3="-5.161483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46965122" y3="-5.88213434" z3="-4.21590037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13303254" y3="-5.3042517" z3="-2.99826148">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37755842" y3="-3.07263881" z3="-3.94081484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94989979" y3="-3.00985039" z3="-5.99645754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52227553" y3="-6.96989735" z3="-4.30764079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94759145" y3="-5.93632746" z3="-2.12564439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65145575" y3="-3.36368959" z3="-1.60717753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34498462" y3="-3.84740396" z3="-0.85760436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68587147" y3="-4.85181066" z3="-1.1223112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3767739" y3="-3.54054415" z3="0.59003555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39810044" y3="-3.05533255" z3="3.34709921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67448838" y3="-4.57350117" z3="1.48733552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10975821" y3="-2.26046145" z3="1.08468958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11716887" y3="-2.01992217" z3="2.45427188">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67653383" y3="-4.33294921" z3="2.86022284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.86224068" y3="-5.58422286" z3="1.11250041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09110499" y3="-1.42205346" z3="0.41677206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10598989" y3="-1.00956302" z3="2.80772106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.87481906" y3="-5.15567306" z3="3.55207209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39313543" y3="-2.87026043" z3="4.42525704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32756472" y3="-1.73687344" z3="-3.91344632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46093449" y3="-1.329262" z3="-3.01194333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33968088" y3="3.71653802" z3="-1.04949636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13645172" y3="-2.98903647" z3="-1.70776421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91928295" y3="-3.16405109" z3="-0.56240441">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11100039" y3="-2.28651241" z3="0.36728791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83967716" y3="-0.72107314" z3="0.62142618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70938817" y3="-0.25523294" z3="-0.96191334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.53102329" y3="0.45642721" z3="1.20411447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07593424" y3="-1.06090165" z3="1.98460824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.39874428" y3="-4.37577861" z3="-0.32075692">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.10957978" y3="-4.61270705" z3="0.88506875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0144333" y3="0.04051053" z3="-1.76326382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37096584" y3="0.60972046" z3="-0.77328015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.33506096" y3="-1.08581021" z3="-1.33571487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6444157" y3="0.55963373" z3="0.55202153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16459027" y3="0.1519247" z3="2.20008745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-3.00030352" y3="1.45260606" z3="1.30516278">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53630707" y3="-0.11353881" z3="2.31914281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88974171" y3="-1.72855198" z3="1.65096296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58203363" y3="-1.52280838" z3="2.8579161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.04702502" y3="-4.03319176" z3="0.90396421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.49473723" y3="-4.35312975" z3="1.76094681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.33746713" y3="-5.68689116" z3="0.88417035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27345623" y3="-2.19853388" z3="-0.17829377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13333204" y3="-3.29670695" z3="-1.03924516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49224837" y3="-4.45715269" z3="-0.62258251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99609433" y3="-4.51442174" z3="0.67429942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14121768" y3="-3.45499329" z3="1.56506795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77304237" y3="-2.29693655" z3="1.12979873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49001999" y3="-3.22482142" z3="-2.06997424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35276688" y3="-5.29800636" z3="-1.30237384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26224834" y3="-5.70494836" z3="1.1050091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73433992" y3="-3.5368506" z3="2.57405332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86401096" y3="-1.44851283" z3="1.80962357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49129449" y3="4.02202152" z3="0.03680909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86183064" y3="3.80811715" z3="-0.02770452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3989135" y3="3.28726212" z3="-1.19990047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60731367" y3="3.00576998" z3="-2.31058627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23728737" y3="3.21854417" z3="-2.22681561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04693758" y3="4.38581425" z3="0.96642067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51120592" y3="4.01671547" z3="0.82311317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83395065" y3="2.99748752" z3="-1.25727954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06597275" y3="2.61073772" z3="-3.21781366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39706473" y3="2.97387296" z3="-3.08028796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17104755" y3="-5.91795764" z3="2.29299051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7685928" y3="-6.40747773" z3="0.24176166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31563224" y3="2.71832254" z3="-2.33397382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46243887" y3="3.03531622" z3="-0.21596384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6212609" y3="0.16223091" z3="-2.02434264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94749949" y3="1.410098" z3="-1.88377496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80187565" y3="0.09035824" z3="-2.8142391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28167736" y3="1.19827958" z3="-3.46753976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31556299" y3="-0.87191145" z3="-2.90241919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18723786" y3="1.13076081" z3="-4.07679532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45294236" y3="2.53149166" z3="-2.59960467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58811794" y3="2.42837877" z3="-3.36723653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92320861" y3="3.48450903" z3="-2.54181882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95519796" y3="3.30347105" z3="-3.91091103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57909449" y3="3.90403778" z3="-0.2462682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76155511" y3="5.05584679" z3="-0.05200134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92778796" y3="3.95472873" z3="0.20607261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44535989" y3="5.09812132" z3="0.76582874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55645932" y3="3.06721108" z3="0.11083026">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48442098" y3="5.11099813" z3="1.10691927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32989253" y3="6.22900164" z3="0.51708124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64441313" y3="6.25620507" z3="0.91178377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69325708" y3="7.10968731" z3="0.64650492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07001468" y3="7.16217474" z3="1.35216964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35498035" y3="-3.94092465" z3="-2.86711384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53449436" y3="-4.97588554" z3="-2.53746031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22920949" y3="-3.62044316" z3="-3.46464859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48128133" y3="-3.9355967" z3="-3.53802403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.70253633" y3="-1.60163483" z3="-2.09656175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.44031896" y3="-1.13207493" z3="-2.77212256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53989552" y3="-0.93594536" z3="-1.23438447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75295172" y3="-1.6443998" z3="-2.65383293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9122,-.9563,-.6861;6.5951,-1.953,-1.5528;6.0786,-.9982,-1.4145;4.7728,1.4765,-1.0655;4.2826,.31,-.5037;2.6558,2.7405,-1.1551;4.0047,2.7355,-.847;2.3809,4.9962,-.3747;1.8098,3.8561,-.889;1.7558,5.8723,-.1778;2.0897,1.6163,-1.6825;3.122,.3578,.2132;1.7087,.3885,-.6453;.6046,.7403,.2823;1.6562,-.8513,-1.5101;1.0913,-2.4688,-1.3264;2.0238,-5.4925,-6.273;1.7559,-5.0568,-5.3062;1.0539,-3.9133,-2.8513;1.7196,-3.6762,-5.1615;1.4697,-5.8821,-4.2159;1.133,-5.3043,-2.9983;1.3776,-3.0726,-3.9408;1.9499,-3.0099,-5.9965;1.5223,-6.9699,-4.3076;.9476,-5.9363,-2.1256;.6515,-3.3637,-1.6072;-.345,-3.8474,-.8576;-.6859,-4.8518,-1.1223;-.3768,-3.5405,.59;-.3981,-3.0553,3.3471;-.6745,-4.5735,1.4873;-.1098,-2.2605,1.0847;-.1172,-2.0199,2.4543;-.6765,-4.3329,2.8602;-.8622,-5.5842,1.1125;.0911,-1.4221,.4168;.106,-1.0096,2.8077;-.8748,-5.1557,3.5521;-.3931,-2.8703,4.4253;1.3276,-1.7369,-3.9134;1.4609,-1.3293,-3.0119;.3397,3.7165,-1.0495;-2.1365,-2.989,-1.7078;-2.9193,-3.1641,-.5624;-3.111,-2.2865,.3673;-3.8397,-.7211,.6214;-4.7094,-.2552,-.9619;-2.531,.4564,1.2041;-5.0759,-1.0609,1.9846;-3.3987,-4.3758,-.3208;-4.1096,-4.6127,.8851;-4.0144,.0405,-1.7633;-5.371,.6097,-.7733;-5.3351,-1.0858,-1.3357;-1.6444,.5596,.552;-2.1646,.1519,2.2001;-3.0003,1.4526,1.3052;-5.5363,-.1135,2.3191;-5.8897,-1.7286,1.651;-4.582,-1.5228,2.8579;-5.047,-4.0332,.904;-3.4947,-4.3531,1.7609;-4.3375,-5.6869,.8842;4.2735,-2.1985,-.1783;4.1333,-3.2967,-1.0392;3.4922,-4.4572,-.6226;2.9961,-4.5144,.6743;3.1412,-3.455,1.5651;3.773,-2.2969,1.1298;4.49,-3.2248,-2.07;3.3528,-5.298,-1.3024;2.2622,-5.7049,1.105;2.7343,-3.5369,2.5741;3.864,-1.4485,1.8096;-.4913,4.022,.0368;-1.8618,3.8081,-.0277;-2.3989,3.2873,-1.1999;-1.6073,3.0058,-2.3106;-.2373,3.2185,-2.2268;-.0469,4.3858,.9664;-2.5112,4.0167,.8231;-3.834,2.9975,-1.2573;-2.066,2.6107,-3.2178;.3971,2.9739,-3.0803;2.171,-5.918,2.293;1.7686,-6.4075,.2418;-4.3156,2.7183,-2.334;-4.4624,3.0353,-.216;6.6213,.1622,-2.0243;5.9475,1.4101,-1.8838;7.8019,.0904,-2.8142;8.2817,1.1983,-3.4675;8.3156,-.8719,-2.9024;9.1872,1.1308,-4.0768;6.4529,2.5315,-2.5996;7.5881,2.4284,-3.3672;5.9232,3.4845,-2.5418;7.9552,3.3035,-3.9109;4.5791,3.904,-.2463;3.7616,5.0558,-.052;5.9278,3.9547,.2061;6.4454,5.0981,.7658;6.5565,3.0672,.1108;7.4844,5.111,1.1069;4.3299,6.229,.5171;5.6444,6.2562,.9118;3.6933,7.1097,.6465;6.07,7.1622,1.3522;-2.355,-3.9409,-2.8671;-2.5345,-4.9759,-2.5375;-3.2292,-3.6204,-3.4646;-1.4813,-3.9356,-3.538;-1.7025,-1.6016,-2.0966;-2.4403,-1.1321,-2.7721;-1.5399,-.9359,-1.2344;-.753,-1.6444,-2.6538;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929218828</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000503186098 0.000077361944 0.021165615813 0.005329962001</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057136716 -0.000078850 0.000022360 0.000112817 0.000256211 0.000358016 0.000412307 0.000580705 0.000720188 0.000788450 0.000915701 0.001021797 0.001191652 0.001265704 0.001384348 0.001496943 0.001621481 0.001722093 0.001778567 0.002067442 0.002310657 0.002586561 0.002812317 0.003051431 0.003306710 0.003673881 0.003929508 0.004526554 0.004761789 0.004884154 0.005171428 0.005333061 0.006006866 0.006365569 0.006511580 0.006819520 0.006941341 0.007396004 0.008191815 0.008654757 0.008815052 0.009393892 0.009753835 0.009887443 0.010961888 0.011218887 0.011884021 0.012643282 0.013377649 0.013700224 0.013990797 0.014630760 0.014868968 0.015421185 0.015900922 0.016049369 0.016778284 0.018647509 0.019270906 0.019444810 0.020213388 0.020556961 0.021551560 0.021774668 0.022445960 0.022808660 0.023494240 0.023797128 0.024565081 0.025907484 0.026586357 0.027104970 0.027177440 0.027512198 0.028414220 0.028816411 0.029814346 0.031054105 0.031582857 0.034251411 0.034809527 0.036033411 0.039084879 0.039660999 0.042006124 0.045449061 0.046130219 0.046728388 0.048865383 0.049700577 0.050094110 0.050839343 0.051553368 0.052216249 0.052291878 0.052416704 0.053027849 0.053646121 0.055002731 0.056118234 0.056452490 0.056724782 0.057018427 0.057092679 0.057817011 0.058642969 0.059280103 0.059796590 0.061352961 0.062170731 0.062985290 0.064347388 0.064586322 0.065134798 0.066052134 0.067578988 0.067867647 0.069027313 0.070496650 0.071491854 0.072250057 0.072644970 0.073006706 0.073084841 0.078691589 0.080469685 0.081934905 0.082615094 0.083526760 0.084646523 0.089109100 0.089472064 0.089828933 0.091346013 0.093338791 0.094584939 0.095502552 0.096301610 0.096874265 0.098573363 0.100195727 0.100708471 0.102820325 0.104007434 0.104747571 0.106953692 0.109472641 0.111104984 0.112488317 0.112897590 0.114027512 0.114913260 0.117024619 0.117451865 0.118638645 0.119198440 0.120691854 0.122239969 0.125097846 0.125866997 0.128714609 0.129064384 0.131083017 0.133895851 0.136942525 0.137924336 0.138621342 0.139738296 0.140424894 0.143431881 0.144573028 0.145903008 0.146818423 0.152010398 0.153606412 0.154127651 0.159630070 0.160848246 0.168578262 0.171473274 0.176592339 0.179202164 0.181650060 0.184538817 0.189209288 0.190718665 0.191993002 0.201382833 0.202254648 0.206362305 0.206970045 0.207272568 0.212508674 0.212822511 0.215642747 0.217023345 0.220433081 0.220945411 0.224630987 0.225152243 0.227207612 0.231916807 0.234612510 0.236259728 0.238588933 0.246326788 0.248466299 0.252762385 0.256601274 0.257243375 0.258355884 0.262585707 0.271601570 0.282931273 0.292053142 0.300149213 0.300274602 0.301131037 0.307200055 0.307808882 0.309863807 0.319995501 0.321408807 0.326505544 0.330974607 0.336688951 0.347772336 0.352030898 0.355653031 0.360881073 0.362159882 0.364157425 0.384580004 0.407474238 0.414458853 0.430332571 0.431728419 0.435442628 0.451165297 0.464789859 0.475699892 0.479015136 0.480510911 0.486635873 0.498907704 0.503881947 0.515256534 0.518061858 0.543979099 0.566946027 0.567739595 0.586870329 0.591808370 0.606047940 0.644303918 0.645719150 0.668133649 0.675647979 0.687425323 0.703743891 0.704143630 0.704421433 0.711399427 0.717300575 0.734354186 0.738042688 0.739779939 0.747119369 0.750874732 0.771626254 0.775994533 0.809393874 0.821873309 0.824281444 0.828954261 0.834345329 0.848390135 0.849589064 0.851428574 0.854682907 0.863526471 0.867477847 0.875997564 0.887598827 0.891385437 0.892357356 0.893779070 0.902136720 0.910632294 0.918004804 0.922732627 0.924572616 0.932033909 0.936124783 0.956153568 0.962767402 0.965402082 0.970120991 0.977292012 0.982591350 0.998693254 1.013106676 1.016313096 1.021971301 1.040323672 1.055270685 1.071383407 1.073128113 1.080468691 1.087586364 1.108568628 1.110441881 1.118319082 1.119312764 1.122637741 1.124008640 1.141922403 1.150066569 1.161782645 1.170200182 1.177474578 1.189042498 1.200829035 1.222187372 1.234293236 1.258290432 1.296534194 1.299539333 1.314776371 1.326484446 1.327517201 1.330345993 1.331481087 1.334844849 1.342562855 1.349260799 1.369207101 1.380017661 1.381350606 1.381917832 1.429558586 1.513013824 1.557999088 1.684867897 1.922884851</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">301</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91849393" y3="-0.95469199" z3="-0.6853086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60263984" y3="-1.9498068" z3="-1.55120315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0848471" y3="-0.99560631" z3="-1.41361581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77486216" y3="1.47751647" z3="-1.06729919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2869677" y3="0.31085601" z3="-0.50403367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65532018" y3="2.73782726" z3="-1.15658876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00469022" y3="2.7353749" z3="-0.84986242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37810772" y3="4.99403276" z3="-0.37883517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80794542" y3="3.85239678" z3="-0.89092273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7516132" y3="5.86990273" z3="-0.18010258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09015398" y3="1.61226298" z3="-1.68218256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12658905" y3="0.35743367" z3="0.21342735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71289596" y3="0.38377305" z3="-0.64434183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60833256" y3="0.7330742" z3="0.28374924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66305044" y3="-0.85661176" z3="-1.50844844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09461479" y3="-2.47419076" z3="-1.3240922">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01663023" y3="-5.49868061" z3="-6.27306908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75103867" y3="-5.06247771" z3="-5.30586037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05411041" y3="-3.91744979" z3="-2.85027345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71873555" y3="-3.68172037" z3="-5.16080244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46367925" y3="-5.88726096" z3="-4.21544335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12965159" y3="-5.30865551" z3="-2.99740813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37937051" y3="-3.07748136" z3="-3.93974475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94987417" y3="-3.01585791" z3="-5.99588888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51327695" y3="-6.97515907" z3="-4.30746196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9430381" y3="-5.94030839" z3="-2.12478743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6523652" y3="-3.3668508" z3="-1.60639302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34597342" y3="-3.84967997" z3="-0.85779691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68944792" y3="-4.85240327" z3="-1.12512023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37909732" y3="-3.5464145" z3="0.59039994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40916473" y3="-3.06807297" z3="3.34826058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68507325" y3="-4.58043406" z3="1.4837937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10787899" y3="-2.26844416" z3="1.08917864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11958924" y3="-2.03170147" z3="2.45938536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69160275" y3="-4.34336452" z3="2.85711626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87727486" y3="-5.58817269" z3="1.1049701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09957805" y3="-1.4291471" z3="0.42440261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10700338" y3="-1.02352929" z3="2.81673022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89598468" y3="-5.16717505" z3="3.5465174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4076879" y3="-2.8858599" z3="4.42684818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33293052" y3="-1.74160285" z3="-3.91187973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46695258" y3="-1.33467872" z3="-3.01019214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.337557" y3="3.71166214" z3="-1.04846419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13330003" y3="-2.98441336" z3="-1.70813916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91873226" y3="-3.16080955" z3="-0.56502028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1092411" y3="-2.28533426" z3="0.36710643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83535889" y3="-0.71935977" z3="0.62323883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70371487" y3="-0.25300497" z3="-0.96074544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52586688" y3="0.45642175" z3="1.20755939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07258239" y3="-1.0575487" z3="1.98564599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40315157" y3="-4.37134342" z3="-0.32906792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11959766" y3="-4.60971538" z3="0.87300036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00806396" y3="0.04560844" z3="-1.7604859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36806314" y3="0.60978981" z3="-0.77224993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32649406" y3="-1.08470405" z3="-1.3370574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.637865" y3="0.55776055" z3="0.55709858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16177262" y3="0.15235316" z3="2.20438043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99360617" y3="1.45344258" z3="1.30677658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53483508" y3="-0.10978103" z3="2.31630834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88482012" y3="-1.72765943" z3="1.65337099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57908779" y3="-1.51566832" z3="2.86107684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05675076" y3="-4.02917119" z3="0.88868964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50878139" y3="-4.35354199" z3="1.75215332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34876121" y3="-5.68382797" z3="0.86904814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28008266" y3="-2.19665082" z3="-0.17640735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13621385" y3="-3.29419991" z3="-1.03737983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49276047" y3="-4.45319255" z3="-0.62004164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99818738" y3="-4.50950932" z3="0.67751307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14773911" y3="-3.45084078" z3="1.56846467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78195455" y3="-2.29435327" z3="1.13256667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49158542" y3="-3.22281447" z3="-2.0686177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35083112" y3="-5.29431164" z3="-1.29964399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26159291" y3="-5.69833844" z3="1.10914735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7426733" y3="-3.53237137" z3="2.57815783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87654129" y3="-1.44658903" z3="1.81249487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49154601" y3="4.02084659" z3="0.03824055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86240478" y3="3.80863301" z3="-0.02384305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4018449" y3="3.28587334" z3="-1.19409975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61209797" y3="3.00009822" z3="-2.30499709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24160337" y3="3.21087014" z3="-2.2234802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04543935" y3="4.38662458" z3="0.96628302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51030486" y3="4.02027986" z3="0.82736228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83739444" y3="2.99854524" z3="-1.24878815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07255826" y3="2.60352143" z3="-3.21064493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39117357" y3="2.9633106" z3="-3.07744038">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16892318" y3="-5.9097088" z3="2.29738949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76739775" y3="-6.40101104" z3="0.24632642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32172297" y3="2.7215195" z3="-2.32485269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46358795" y3="3.03583981" z3="-0.20616212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62577691" y3="0.16526674" z3="-2.02438506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94982385" y3="1.4121458" z3="-1.88534881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8069037" y3="0.09475679" z3="-2.81365827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28514747" y3="1.20291067" z3="-3.46775081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3223941" y3="-0.86665305" z3="-2.90062722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19121552" y3="1.13643509" z3="-4.07637716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45355557" y3="2.53365752" z3="-2.60221685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58933765" y3="2.43185162" z3="-3.3691137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92211456" y3="3.48578061" z3="-2.54566044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95515644" y3="3.30709047" z3="-3.91342116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57806987" y3="3.90544793" z3="-0.25107017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75905905" y3="5.05624376" z3="-0.05777009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92683088" y3="3.95883959" z3="0.20067027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44299647" y3="5.10380746" z3="0.75844461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55656563" y3="3.07234217" z3="0.10745176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48211099" y3="5.11873934" z3="1.09911849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32573359" y3="6.23102415" z3="0.50962875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64045017" y3="6.2608643" z3="0.90334619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68758477" y3="7.11074908" z3="0.63880035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06483327" y3="7.16801827" z3="1.34248069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35241705" y3="-3.93199538" z3="-2.8708426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53415239" y3="-4.96748391" z3="-2.54560489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22583949" y3="-3.60839083" z3="-3.46848104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47814113" y3="-3.92621488" z3="-3.54091999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69527711" y3="-1.59675111" z3="-2.09226013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43184544" y3="-1.1227315" z3="-2.76612675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53020831" y3="-0.93450339" z3="-1.2279959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74596237" y3="-1.64076694" z3="-2.64994092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9185,-.9547,-.6853;6.6026,-1.9498,-1.5512;6.0848,-.9956,-1.4136;4.7749,1.4775,-1.0673;4.287,.3109,-.504;2.6553,2.7378,-1.1566;4.0047,2.7354,-.8499;2.3781,4.994,-.3788;1.8079,3.8524,-.8909;1.7516,5.8699,-.1801;2.0902,1.6123,-1.6822;3.1266,.3574,.2134;1.7129,.3838,-.6443;.6083,.7331,.2837;1.6631,-.8566,-1.5084;1.0946,-2.4742,-1.3241;2.0166,-5.4987,-6.2731;1.751,-5.0625,-5.3059;1.0541,-3.9174,-2.8503;1.7187,-3.6817,-5.1608;1.4637,-5.8873,-4.2154;1.1297,-5.3087,-2.9974;1.3794,-3.0775,-3.9397;1.9499,-3.0159,-5.9959;1.5133,-6.9752,-4.3075;.943,-5.9403,-2.1248;.6524,-3.3669,-1.6064;-.346,-3.8497,-.8578;-.6894,-4.8524,-1.1251;-.3791,-3.5464,.5904;-.4092,-3.0681,3.3483;-.6851,-4.5804,1.4838;-.1079,-2.2684,1.0892;-.1196,-2.0317,2.4594;-.6916,-4.3434,2.8571;-.8773,-5.5882,1.105;.0996,-1.4291,.4244;.107,-1.0235,2.8167;-.896,-5.1672,3.5465;-.4077,-2.8859,4.4268;1.3329,-1.7416,-3.9119;1.467,-1.3347,-3.0102;.3376,3.7117,-1.0485;-2.1333,-2.9844,-1.7081;-2.9187,-3.1608,-.565;-3.1092,-2.2853,.3671;-3.8354,-.7194,.6232;-4.7037,-.253,-.9607;-2.5259,.4564,1.2076;-5.0726,-1.0575,1.9856;-3.4032,-4.3713,-.3291;-4.1196,-4.6097,.873;-4.0081,.0456,-1.7605;-5.3681,.6098,-.7722;-5.3265,-1.0847,-1.3371;-1.6379,.5578,.5571;-2.1618,.1524,2.2044;-2.9936,1.4534,1.3068;-5.5348,-.1098,2.3163;-5.8848,-1.7277,1.6534;-4.5791,-1.5157,2.8611;-5.0568,-4.0292,.8887;-3.5088,-4.3535,1.7522;-4.3488,-5.6838,.869;4.2801,-2.1967,-.1764;4.1362,-3.2942,-1.0374;3.4928,-4.4532,-.62;2.9982,-4.5095,.6775;3.1477,-3.4508,1.5685;3.782,-2.2944,1.1326;4.4916,-3.2228,-2.0686;3.3508,-5.2943,-1.2996;2.2616,-5.6983,1.1091;2.7427,-3.5324,2.5782;3.8765,-1.4466,1.8125;-.4915,4.0208,.0382;-1.8624,3.8086,-.0238;-2.4018,3.2859,-1.1941;-1.6121,3.0001,-2.305;-.2416,3.2109,-2.2235;-.0454,4.3866,.9663;-2.5103,4.0203,.8274;-3.8374,2.9985,-1.2488;-2.0726,2.6035,-3.2106;.3912,2.9633,-3.0774;2.1689,-5.9097,2.2974;1.7674,-6.401,.2463;-4.3217,2.7215,-2.3249;-4.4636,3.0358,-.2062;6.6258,.1653,-2.0244;5.9498,1.4121,-1.8853;7.8069,.0948,-2.8137;8.2851,1.2029,-3.4678;8.3224,-.8667,-2.9006;9.1912,1.1364,-4.0764;6.4536,2.5337,-2.6022;7.5893,2.4319,-3.3691;5.9221,3.4858,-2.5457;7.9552,3.3071,-3.9134;4.5781,3.9054,-.2511;3.7591,5.0562,-.0578;5.9268,3.9588,.2007;6.443,5.1038,.7584;6.5566,3.0723,.1075;7.4821,5.1187,1.0991;4.3257,6.231,.5096;5.6405,6.2609,.9033;3.6876,7.1107,.6388;6.0648,7.168,1.3425;-2.3524,-3.932,-2.8708;-2.5342,-4.9675,-2.5456;-3.2258,-3.6084,-3.4685;-1.4781,-3.9262,-3.5409;-1.6953,-1.5968,-2.0923;-2.4318,-1.1227,-2.7661;-1.5302,-.9345,-1.228;-.746,-1.6408,-2.6499;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930824848</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000811914685 0.000129702986 0.016959127886 0.005322198351</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057137226 -0.000007815 0.000034482 0.000064014 0.000272167 0.000329651 0.000404608 0.000570604 0.000717685 0.000783770 0.000910677 0.001021078 0.001191424 0.001263898 0.001384803 0.001495281 0.001619443 0.001719727 0.001779061 0.002065778 0.002311809 0.002586628 0.002807443 0.003052399 0.003302732 0.003672807 0.003928815 0.004525615 0.004755726 0.004883971 0.005171367 0.005334194 0.006007525 0.006363693 0.006516092 0.006808602 0.006942471 0.007394203 0.008191159 0.008651920 0.008814230 0.009389324 0.009753709 0.009886438 0.010961733 0.011221556 0.011885798 0.012644363 0.013378019 0.013694500 0.013989763 0.014630765 0.014865937 0.015420769 0.015899445 0.016044293 0.016782048 0.018648516 0.019275283 0.019444962 0.020213734 0.020557099 0.021549678 0.021774861 0.022449588 0.022808759 0.023495964 0.023795678 0.024566697 0.025907607 0.026575102 0.027109633 0.027193465 0.027521720 0.028433220 0.028804995 0.029782358 0.031054091 0.031582737 0.034255189 0.034811590 0.036034009 0.039088055 0.039669262 0.042007459 0.045451523 0.046127688 0.046727336 0.048865950 0.049700860 0.050097986 0.050839353 0.051553937 0.052218854 0.052292255 0.052416842 0.053029625 0.053646657 0.055004318 0.056118949 0.056453787 0.056725127 0.057019540 0.057092592 0.057818923 0.058644897 0.059283214 0.059798191 0.061352679 0.062171078 0.062987982 0.064348124 0.064586677 0.065136114 0.066052944 0.067583871 0.067870493 0.069029560 0.070491351 0.071469695 0.072248414 0.072635676 0.073013629 0.073070369 0.078693563 0.080464455 0.081933225 0.082585789 0.083522465 0.084647365 0.089119268 0.089479433 0.089830328 0.091346406 0.093340623 0.094585315 0.095503406 0.096302317 0.096874509 0.098573858 0.100198317 0.100708682 0.102820289 0.104008228 0.104757532 0.106962266 0.109511138 0.111105834 0.112501697 0.112903196 0.114032174 0.114928655 0.117024950 0.117452660 0.118638852 0.119198436 0.120692680 0.122241475 0.125096458 0.125867705 0.128723122 0.129064571 0.131086240 0.133896515 0.136966428 0.137941410 0.138624277 0.139738656 0.140423829 0.143432328 0.144571151 0.145902834 0.146818531 0.152010518 0.153607494 0.154128862 0.159615729 0.160846786 0.168579770 0.171475286 0.176619260 0.179209221 0.181652619 0.184538697 0.189216215 0.190739997 0.191996880 0.201384517 0.202256418 0.206367295 0.206969929 0.207272951 0.212509260 0.212859144 0.215641931 0.217022441 0.220434910 0.220945504 0.224636489 0.225153080 0.227207955 0.231917836 0.234613185 0.236267815 0.238589659 0.246326059 0.248462296 0.252765918 0.256606144 0.257245178 0.258356141 0.262586929 0.271602877 0.282931324 0.292054779 0.300149457 0.300277629 0.301134040 0.307203036 0.307809810 0.309864089 0.319995804 0.321410361 0.326508052 0.330977880 0.336689321 0.347773303 0.352031534 0.355653277 0.360888568 0.362162407 0.364157362 0.384580913 0.407491868 0.414465671 0.430333105 0.431719775 0.435447817 0.451168276 0.464791573 0.475700213 0.479019608 0.480511289 0.486662952 0.498907984 0.503881418 0.515256732 0.518060753 0.543987099 0.566946474 0.567739965 0.586884467 0.591806005 0.606062503 0.644306827 0.645733981 0.668139515 0.675649429 0.687426550 0.703744865 0.704146105 0.704425225 0.711460805 0.717303310 0.734356957 0.738043405 0.739781464 0.747119329 0.750877286 0.771627070 0.775994898 0.809404161 0.821874545 0.824292683 0.828955460 0.834347521 0.848400470 0.849596568 0.851429725 0.854700774 0.863528060 0.867477977 0.876002143 0.887599032 0.891392686 0.892358821 0.893787570 0.902139057 0.910640269 0.918006445 0.922734386 0.924572926 0.932035491 0.936145940 0.956166738 0.962766985 0.965406216 0.970122553 0.977292954 0.982591251 0.998697389 1.013110527 1.016313767 1.021975493 1.040327413 1.055289425 1.071394278 1.073130899 1.080538123 1.087598888 1.108568912 1.110442157 1.118319694 1.119314584 1.122638097 1.124011817 1.141927028 1.150086767 1.161782969 1.170200232 1.177490835 1.189058885 1.200832450 1.222189608 1.234293533 1.258293740 1.296535742 1.299623745 1.314778489 1.326484578 1.327517494 1.330350922 1.331481678 1.334846957 1.342578168 1.349262880 1.369222537 1.380018621 1.381350642 1.381922307 1.429556146 1.512988025 1.558000574 1.684868458 1.922891724</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">302</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9218404" y3="-0.95438519" z3="-0.68656309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60492676" y3="-1.9473203" z3="-1.55706485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08640619" y3="-0.99373672" z3="-1.41786364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77414741" y3="1.4776953" z3="-1.06801207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28904924" y3="0.31034741" z3="-0.50386772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65263123" y3="2.73471591" z3="-1.15370924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00235138" y3="2.7343141" z3="-0.84879303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37311477" y3="4.99029224" z3="-0.3745243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80405718" y3="3.8480774" z3="-0.88662839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74619423" y3="5.86492522" z3="-0.17837929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08872311" y3="1.60838155" z3="-1.67915863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12965662" y3="0.35545999" z3="0.21532741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71514219" y3="0.37891044" z3="-0.64112524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61068481" y3="0.72609151" z3="0.28781924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66714125" y3="-0.86162228" z3="-1.50499426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09794284" y3="-2.47938783" z3="-1.32094138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01816805" y3="-5.50663119" z3="-6.26917622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75290127" y3="-5.0697616" z3="-5.30218654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.0567011" y3="-3.92293306" z3="-2.84709399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72394182" y3="-3.68899363" z3="-5.15712114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46274058" y3="-5.89380729" z3="-4.21192005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12926432" y3="-5.31430739" z3="-2.99421767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38501991" y3="-3.08382026" z3="-3.93633059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95754515" y3="-3.02378086" z3="-5.99205544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50984488" y3="-6.98182039" z3="-4.30375246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94096152" y3="-5.94540038" z3="-2.12151682">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65529011" y3="-3.37244218" z3="-1.6029555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3458061" y3="-3.85228803" z3="-0.85711664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69159153" y3="-4.85377592" z3="-1.12646504">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38038298" y3="-3.5518523" z3="0.59179965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41282263" y3="-3.08195779" z3="3.35153246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69066677" y3="-4.58741571" z3="1.48195416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10578753" y3="-2.27666042" z3="1.09486697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11912643" y3="-2.04388273" z3="2.46589565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6982772" y3="-4.35463035" z3="2.85608844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88400237" y3="-5.59470868" z3="1.10050226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10483297" y3="-1.43574419" z3="0.43295421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1096249" y3="-1.03740112" z3="2.8267017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90676768" y3="-5.17953396" z3="3.5422081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41240251" y3="-2.90281903" z3="4.43072807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34247023" y3="-1.74784085" z3="-3.90883317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47482094" y3="-1.340891" z3="-3.00689357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.3339237" y3="3.70708423" z3="-1.04459878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12995695" y3="-2.98054047" z3="-1.70836337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91717248" y3="-3.15467726" z3="-0.56584512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10560817" y3="-2.27916052" z3="0.3665361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83050018" y3="-0.71172906" z3="0.62014162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69275365" y3="-0.24398967" z3="-0.96672806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52048949" y3="0.46090736" z3="1.20894338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07393878" y3="-1.04702817" z3="1.97792502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40573193" y3="-4.36401243" z3="-0.33042503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12452787" y3="-4.59991771" z3="0.87092209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99454779" y3="0.05939702" z3="-1.7622493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36187637" y3="0.61528833" z3="-0.77911648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31024213" y3="-1.07732159" z3="-1.34801311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63104745" y3="0.56157521" z3="0.56025439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15870312" y3="0.15457805" z3="2.20598472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98687798" y3="1.458527" z3="1.30892187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53607403" y3="-0.09791144" z3="2.30470208">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88603652" y3="-1.71648084" z3="1.64372003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58472587" y3="-1.50416275" z3="2.85633268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05900106" y3="-4.01562783" z3="0.88563391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51318885" y3="-4.34493901" z3="1.75072231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35808247" y3="-5.67283383" z3="0.86662251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28551515" y3="-2.19700897" z3="-0.17658233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14037822" y3="-3.29453188" z3="-1.03750234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49635393" y3="-4.4530241" z3="-0.61977897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00253079" y3="-4.50891096" z3="0.67807762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15422279" y3="-3.45072445" z3="1.56925618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78915162" y3="-2.2947919" z3="1.13305901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49454807" y3="-3.223158" z3="-2.06915498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3521521" y3="-5.29297368" z3="-1.29965577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26416445" y3="-5.69637336" z3="1.1097472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.75001165" y3="-3.53181483" z3="2.57933177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88511672" y3="-1.44719629" z3="1.81319935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49572617" y3="4.02042267" z3="0.04058209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86691964" y3="3.81093406" z3="-0.0224538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40622481" y3="3.28682435" z3="-1.19211854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61588649" y3="2.99629527" z3="-2.30134048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24501204" y3="3.20401942" z3="-2.21882868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04998604" y3="4.3879423" z3="0.9680505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51533261" y3="4.0261395" z3="0.82741269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84250134" y3="3.00366922" z3="-1.24810739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07622414" y3="2.5986744" z3="-3.20660161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38831543" y3="2.95231569" z3="-3.07095654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17076377" y3="-5.9070411" z3="2.29793961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76960189" y3="-6.39881392" z3="0.24705936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3275481" y3="2.73143261" z3="-2.32502892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46842382" y3="3.03900506" z3="-0.20518827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62430511" y3="0.16789319" z3="-2.0299282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94725062" y3="1.41397268" z3="-1.88883444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80328201" y3="0.09894562" z3="-2.82260161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27831773" y3="1.20777811" z3="-3.47788729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31966162" y3="-0.86183294" z3="-2.9112902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18266805" y3="1.14244263" z3="-4.08922875">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44774298" y3="2.53630065" z3="-2.606659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58144153" y3="2.43593958" z3="-3.37689611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91532668" y3="3.4878013" z3="-2.54829356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94471664" y3="3.31168366" z3="-3.92208369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57456146" y3="3.90480607" z3="-0.24980412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75406629" y3="5.05429419" z3="-0.05442615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92407296" y3="3.9597384" z3="0.19977703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43920033" y3="5.10485785" z3="0.75832169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55540628" y3="3.07403037" z3="0.10303863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47891216" y3="5.12096599" z3="1.09740071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31996862" y3="6.22940793" z3="0.51299896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63506757" y3="6.26062319" z3="0.90543849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68097402" y3="7.10816082" z3="0.64284722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05880625" y3="7.16798064" z3="1.34473516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.3519134" y3="-3.92651764" z3="-2.87168861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53789362" y3="-4.96167758" z3="-2.54622389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22322355" y3="-3.59873811" z3="-3.46942832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4769357" y3="-3.92350359" z3="-3.54091653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68668504" y3="-1.59453338" z3="-2.09124525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42158792" y3="-1.11731751" z3="-2.76464593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51904221" y3="-0.93338244" z3="-1.22646978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73818975" y3="-1.64144736" z3="-2.64960433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9218,-.9544,-.6866;6.6049,-1.9473,-1.5571;6.0864,-.9937,-1.4179;4.7741,1.4777,-1.068;4.289,.3103,-.5039;2.6526,2.7347,-1.1537;4.0024,2.7343,-.8488;2.3731,4.9903,-.3745;1.8041,3.8481,-.8866;1.7462,5.8649,-.1784;2.0887,1.6084,-1.6792;3.1297,.3555,.2153;1.7151,.3789,-.6411;.6107,.7261,.2878;1.6671,-.8616,-1.505;1.0979,-2.4794,-1.3209;2.0182,-5.5066,-6.2692;1.7529,-5.0698,-5.3022;1.0567,-3.9229,-2.8471;1.7239,-3.689,-5.1571;1.4627,-5.8938,-4.2119;1.1293,-5.3143,-2.9942;1.385,-3.0838,-3.9363;1.9575,-3.0238,-5.9921;1.5098,-6.9818,-4.3038;.941,-5.9454,-2.1215;.6553,-3.3724,-1.603;-.3458,-3.8523,-.8571;-.6916,-4.8538,-1.1265;-.3804,-3.5519,.5918;-.4128,-3.082,3.3515;-.6907,-4.5874,1.482;-.1058,-2.2767,1.0949;-.1191,-2.0439,2.4659;-.6983,-4.3546,2.8561;-.884,-5.5947,1.1005;.1048,-1.4357,.433;.1096,-1.0374,2.8267;-.9068,-5.1795,3.5422;-.4124,-2.9028,4.4307;1.3425,-1.7478,-3.9088;1.4748,-1.3409,-3.0069;.3339,3.7071,-1.0446;-2.13,-2.9805,-1.7084;-2.9172,-3.1547,-.5658;-3.1056,-2.2792,.3665;-3.8305,-.7117,.6201;-4.6928,-.244,-.9667;-2.5205,.4609,1.2089;-5.0739,-1.047,1.9779;-3.4057,-4.364,-.3304;-4.1245,-4.5999,.8709;-3.9945,.0594,-1.7622;-5.3619,.6153,-.7791;-5.3102,-1.0773,-1.348;-1.631,.5616,.5603;-2.1587,.1546,2.206;-2.9869,1.4585,1.3089;-5.5361,-.0979,2.3047;-5.886,-1.7165,1.6437;-4.5847,-1.5042,2.8563;-5.059,-4.0156,.8856;-3.5132,-4.3449,1.7507;-4.3581,-5.6728,.8666;4.2855,-2.197,-.1766;4.1404,-3.2945,-1.0375;3.4964,-4.453,-.6198;3.0025,-4.5089,.6781;3.1542,-3.4507,1.5693;3.7892,-2.2948,1.1331;4.4945,-3.2232,-2.0692;3.3522,-5.293,-1.2997;2.2642,-5.6964,1.1097;2.75,-3.5318,2.5793;3.8851,-1.4472,1.8132;-.4957,4.0204,.0406;-1.8669,3.8109,-.0225;-2.4062,3.2868,-1.1921;-1.6159,2.9963,-2.3013;-.245,3.204,-2.2188;-.05,4.3879,.9681;-2.5153,4.0261,.8274;-3.8425,3.0037,-1.2481;-2.0762,2.5987,-3.2066;.3883,2.9523,-3.071;2.1708,-5.907,2.2979;1.7696,-6.3988,.2471;-4.3275,2.7314,-2.325;-4.4684,3.039,-.2052;6.6243,.1679,-2.0299;5.9473,1.414,-1.8888;7.8033,.0989,-2.8226;8.2783,1.2078,-3.4779;8.3197,-.8618,-2.9113;9.1827,1.1424,-4.0892;6.4477,2.5363,-2.6067;7.5814,2.4359,-3.3769;5.9153,3.4878,-2.5483;7.9447,3.3117,-3.9221;4.5746,3.9048,-.2498;3.7541,5.0543,-.0544;5.9241,3.9597,.1998;6.4392,5.1049,.7583;6.5554,3.074,.103;7.4789,5.121,1.0974;4.32,6.2294,.513;5.6351,6.2606,.9054;3.681,7.1082,.6428;6.0588,7.168,1.3447;-2.3519,-3.9265,-2.8717;-2.5379,-4.9617,-2.5462;-3.2232,-3.5987,-3.4694;-1.4769,-3.9235,-3.5409;-1.6867,-1.5945,-2.0912;-2.4216,-1.1173,-2.7646;-1.519,-.9334,-1.2265;-.7382,-1.6414,-2.6496;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928755162</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000685308877 0.000125875974 0.017869442252 0.005337910703</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057137431 -0.000051592 0.000033868 0.000078336 0.000243383 0.000289304 0.000403522 0.000554273 0.000713993 0.000778756 0.000907359 0.001020912 0.001191250 0.001262647 0.001385771 0.001494316 0.001615791 0.001714539 0.001775197 0.002065876 0.002308317 0.002586977 0.002804495 0.003055073 0.003262276 0.003672207 0.003929860 0.004523777 0.004740985 0.004878919 0.005170303 0.005328749 0.006003193 0.006363896 0.006507358 0.006785782 0.006938572 0.007391871 0.008190733 0.008650761 0.008813170 0.009387179 0.009754158 0.009886685 0.010961299 0.011219417 0.011884834 0.012643526 0.013377645 0.013691671 0.013988831 0.014630812 0.014865111 0.015420939 0.015899364 0.016041841 0.016782582 0.018649762 0.019277686 0.019445751 0.020217351 0.020558908 0.021551076 0.021769576 0.022447386 0.022809406 0.023496421 0.023790637 0.024567922 0.025907049 0.026570640 0.027104911 0.027201287 0.027536838 0.028448145 0.028797355 0.029775755 0.031056399 0.031582873 0.034256045 0.034812017 0.036033045 0.039089150 0.039673817 0.042007644 0.045453771 0.046128336 0.046726351 0.048865380 0.049700827 0.050099406 0.050839194 0.051554186 0.052219066 0.052292422 0.052416997 0.053030414 0.053646616 0.055005196 0.056119271 0.056454365 0.056724911 0.057019804 0.057092076 0.057820176 0.058646416 0.059283864 0.059798663 0.061352484 0.062171792 0.062990139 0.064348373 0.064586517 0.065137453 0.066052902 0.067591867 0.067861863 0.069029994 0.070489056 0.071441121 0.072236639 0.072618410 0.073012249 0.073072482 0.078681595 0.080409438 0.081896837 0.082546697 0.083509085 0.084648512 0.089126380 0.089483194 0.089829691 0.091346404 0.093341115 0.094585066 0.095504763 0.096302098 0.096874517 0.098574618 0.100197231 0.100708821 0.102820545 0.104008028 0.104762113 0.106966060 0.109522455 0.111107026 0.112508456 0.112909077 0.114033507 0.114935705 0.117025083 0.117452914 0.118636784 0.119197302 0.120692535 0.122236958 0.125094545 0.125867747 0.128728694 0.129066028 0.131089350 0.133896586 0.136975138 0.137947806 0.138627392 0.139739885 0.140420615 0.143429679 0.144571194 0.145900946 0.146818572 0.152008954 0.153605707 0.154127470 0.159607129 0.160841922 0.168580334 0.171476607 0.176632965 0.179213163 0.181653668 0.184539035 0.189218854 0.190747385 0.191998074 0.201385708 0.202257375 0.206367922 0.206969878 0.207273034 0.212509507 0.212877018 0.215640948 0.217014223 0.220435429 0.220944212 0.224632604 0.225153811 0.227207782 0.231918304 0.234613940 0.236269880 0.238590218 0.246325837 0.248462582 0.252770365 0.256608156 0.257246196 0.258356188 0.262586754 0.271603578 0.282931320 0.292055705 0.300149545 0.300278571 0.301134690 0.307204725 0.307810393 0.309863709 0.319997200 0.321410745 0.326508675 0.330977226 0.336689474 0.347773192 0.352031670 0.355653115 0.360882094 0.362163311 0.364157232 0.384580478 0.407507226 0.414465642 0.430333032 0.431714015 0.435452684 0.451169688 0.464795759 0.475703756 0.479020809 0.480511624 0.486673297 0.498908074 0.503881190 0.515258332 0.518059829 0.543995019 0.566946086 0.567740575 0.586890439 0.591796651 0.606068478 0.644308528 0.645745375 0.668142549 0.675650420 0.687427674 0.703743737 0.704148561 0.704429929 0.711488358 0.717305688 0.734358065 0.738043603 0.739781802 0.747118047 0.750879710 0.771627589 0.775995213 0.809406411 0.821875817 0.824299044 0.828956053 0.834348565 0.848401061 0.849600319 0.851430666 0.854714912 0.863530304 0.867478003 0.876004260 0.887598877 0.891396469 0.892355059 0.893789345 0.902139101 0.910642498 0.918005231 0.922715543 0.924572455 0.932036241 0.936157710 0.956166147 0.962770375 0.965408674 0.970123149 0.977282870 0.982591154 0.998702441 1.013110644 1.016314334 1.021977507 1.040327852 1.055303741 1.071401161 1.073132090 1.080560546 1.087602857 1.108569182 1.110442232 1.118319719 1.119315270 1.122638417 1.124014294 1.141930461 1.150096657 1.161783056 1.170200437 1.177500612 1.189061140 1.200833637 1.222194720 1.234293414 1.258296506 1.296536734 1.299652362 1.314780106 1.326483856 1.327506910 1.330351854 1.331481766 1.334847229 1.342585721 1.349263025 1.369224999 1.380018784 1.381350620 1.381924653 1.429535700 1.512862499 1.558000500 1.684868655 1.922892147</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">303</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91952106" y3="-0.95462361" z3="-0.68183149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60329406" y3="-1.95015366" z3="-1.54794372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08544473" y3="-0.99591483" z3="-1.41081711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77495727" y3="1.47723183" z3="-1.0661863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28802384" y3="0.31103632" z3="-0.5010297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65487527" y3="2.73682326" z3="-1.15436846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00463696" y3="2.73522938" z3="-0.84954344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37823774" y3="4.99483273" z3="-0.38131916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80769333" y3="3.85182757" z3="-0.88983798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75225322" y3="5.87077962" z3="-0.18633516">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08925564" y3="1.61045129" z3="-1.67767769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12854001" y3="0.3581101" z3="0.21782459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71381509" y3="0.38284912" z3="-0.63820792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61008613" y3="0.7320802" z3="0.29079691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66368179" y3="-0.85806901" z3="-1.50151962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09491099" y3="-2.47502279" z3="-1.32103444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02371908" y3="-5.49185466" z3="-6.27320852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75670645" y3="-5.05723488" z3="-5.30568667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05633144" y3="-3.91621032" z3="-2.84910702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72429337" y3="-3.67676468" z3="-5.15839393">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46774012" y3="-5.88376404" z3="-4.21700016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13206756" y3="-5.30714811" z3="-2.99849021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38320678" y3="-3.07451095" z3="-3.93681172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95679699" y3="-3.00956554" z3="-5.99204635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51745595" y3="-6.97149832" z3="-4.31070342">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94437959" y3="-5.94018005" z3="-2.1270565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65341338" y3="-3.36813663" z3="-1.60445617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34656557" y3="-3.85065939" z3="-0.85860976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68984261" y3="-4.85314583" z3="-1.12744677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38153567" y3="-3.54903432" z3="0.59003835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41494045" y3="-3.07465739" z3="3.34885344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68999039" y3="-4.58379228" z3="1.48171725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10915941" y3="-2.27251764" z3="1.09113916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12276988" y3="-2.03751317" z3="2.46169689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69811246" y3="-4.34874984" z3="2.85545033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88176304" y3="-5.59176353" z3="1.10172727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.1004101" y3="-1.43256093" z3="0.42774561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10440662" y3="-1.03001234" z3="2.82072344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90502568" y3="-5.17299991" z3="3.54298663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41485358" y3="-2.89385335" z3="4.42773818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33710201" y3="-1.73865773" z3="-3.90697307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47012743" y3="-1.3331961" z3="-3.00442706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33729097" y3="3.71062203" z3="-1.04601791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13250022" y3="-2.98369068" z3="-1.70946676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91947373" y3="-3.16063316" z3="-0.56718384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11016493" y3="-2.28649013" z3="0.36588923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83532819" y3="-0.71985057" z3="0.62303429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70295909" y3="-0.2510812" z3="-0.96060373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5253002" y3="0.45449602" z3="1.20887448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07349168" y3="-1.05875626" z3="1.98457184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40488573" y3="-4.37130827" z3="-0.33274101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12279633" y3="-4.61019021" z3="0.86848899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00727845" y3="0.04847315" z3="-1.75987486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36724178" y3="0.61150041" z3="-0.77096287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32583626" y3="-1.0821258" z3="-1.3379615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63621592" y3="0.5547491" z3="0.55978931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16309066" y3="0.15023844" z3="2.20635821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99210844" y3="1.45204933" z3="1.30725529">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53498249" y3="-0.11096717" z3="2.31617874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88631834" y3="-1.72771817" z3="1.6512263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58066962" y3="-1.51842896" z3="2.85959428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05899739" y3="-4.02849132" z3="0.88382647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51219023" y3="-4.35464834" z3="1.74845381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3533129" y3="-5.68378306" z3="0.86314021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28117572" y3="-2.19666168" z3="-0.17293178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13773917" y3="-3.29402193" z3="-1.0343387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49350935" y3="-4.45285832" z3="-0.61797813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99773612" y3="-4.50935412" z3="0.67909123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14710468" y3="-3.45111485" z3="1.57059512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7821338" y3="-2.29468323" z3="1.1356659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49375192" y3="-3.22235041" z3="-2.06532231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35104473" y3="-5.29291217" z3="-1.29819884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25975322" y3="-5.69762419" z3="1.10929332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74101203" y3="-3.53258475" z3="2.57989275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87629299" y3="-1.44703962" z3="1.8160064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4910011" y3="4.0216182" z3="0.04080374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86196902" y3="3.80965886" z3="-0.02000204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4023281" y3="3.2855183" z3="-1.18920505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6134044" y3="2.99775121" z3="-2.30017177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.2427793" y3="3.20802954" z3="-2.2198439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04420892" y3="4.38892898" z3="0.96788603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50925193" y3="4.02282793" z3="0.83125738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83812988" y3="2.99938153" z3="-1.24302974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07460815" y3="2.60008999" z3="-3.20496521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3894129" y3="2.95866013" z3="-3.0735348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16565036" y3="-5.90942284" z3="2.29725793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76606433" y3="-6.39955334" z3="0.24562456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32373481" y3="2.72436436" z3="-2.31898528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46324161" y3="3.03559484" z3="-0.19967959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62555449" y3="0.16440461" z3="-2.02327068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94906143" y3="1.41113867" z3="-1.88550161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80615459" y3="0.09326399" z3="-2.81328717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28325171" y3="1.20059766" z3="-3.46956667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32211101" y3="-0.86800891" z3="-2.89904871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18892831" y3="1.13365385" z3="-4.07873512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45147906" y3="2.53169001" z3="-2.60479163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5866716" y3="2.4292377" z3="-3.37251042">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91948219" y3="3.4835852" z3="-2.54951294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95142469" y3="3.30372553" z3="-3.91872334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57843401" y3="3.90681509" z3="-0.25407189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75957778" y3="5.05809879" z3="-0.06244699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92803087" y3="3.96149989" z3="0.19518967">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44510756" y3="5.10808359" z3="0.74885554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55789068" y3="3.07456788" z3="0.10228855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48492978" y3="5.12400127" z3="1.08751766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32737147" y3="6.2346067" z3="0.50019548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64278458" y3="6.26562445" z3="0.89157726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68961574" y3="7.11478901" z3="0.62717749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06806293" y3="7.17420025" z3="1.32686571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35165469" y3="-3.92969202" z3="-2.87348878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53402318" y3="-4.96572034" z3="-2.54898798">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22428149" y3="-3.60448924" z3="-3.47086343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47692646" y3="-3.92338624" z3="-3.5430094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69334895" y3="-1.59601369" z3="-2.0914306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42918001" y3="-1.12068298" z3="-2.76510229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52865388" y3="-0.93494273" z3="-1.22611299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74389034" y3="-1.63967468" z3="-2.64866872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9195,-.9546,-.6818;6.6033,-1.9502,-1.5479;6.0854,-.9959,-1.4108;4.775,1.4772,-1.0662;4.288,.311,-.501;2.6549,2.7368,-1.1544;4.0046,2.7352,-.8495;2.3782,4.9948,-.3813;1.8077,3.8518,-.8898;1.7523,5.8708,-.1863;2.0893,1.6105,-1.6777;3.1285,.3581,.2178;1.7138,.3828,-.6382;.6101,.7321,.2908;1.6637,-.8581,-1.5015;1.0949,-2.475,-1.321;2.0237,-5.4919,-6.2732;1.7567,-5.0572,-5.3057;1.0563,-3.9162,-2.8491;1.7243,-3.6768,-5.1584;1.4677,-5.8838,-4.217;1.1321,-5.3071,-2.9985;1.3832,-3.0745,-3.9368;1.9568,-3.0096,-5.992;1.5175,-6.9715,-4.3107;.9444,-5.9402,-2.1271;.6534,-3.3681,-1.6045;-.3466,-3.8507,-.8586;-.6898,-4.8531,-1.1274;-.3815,-3.549,.59;-.4149,-3.0747,3.3489;-.69,-4.5838,1.4817;-.1092,-2.2725,1.0911;-.1228,-2.0375,2.4617;-.6981,-4.3487,2.8555;-.8818,-5.5918,1.1017;.1004,-1.4326,.4277;.1044,-1.03,2.8207;-.905,-5.173,3.543;-.4149,-2.8939,4.4277;1.3371,-1.7387,-3.907;1.4701,-1.3332,-3.0044;.3373,3.7106,-1.046;-2.1325,-2.9837,-1.7095;-2.9195,-3.1606,-.5672;-3.1102,-2.2865,.3659;-3.8353,-.7199,.623;-4.703,-.2511,-.9606;-2.5253,.4545,1.2089;-5.0735,-1.0588,1.9846;-3.4049,-4.3713,-.3327;-4.1228,-4.6102,.8685;-4.0073,.0485,-1.7599;-5.3672,.6115,-.771;-5.3258,-1.0821,-1.338;-1.6362,.5547,.5598;-2.1631,.1502,2.2064;-2.9921,1.452,1.3073;-5.535,-.111,2.3162;-5.8863,-1.7277,1.6512;-4.5807,-1.5184,2.8596;-5.059,-4.0285,.8838;-3.5122,-4.3546,1.7485;-4.3533,-5.6838,.8631;4.2812,-2.1967,-.1729;4.1377,-3.294,-1.0343;3.4935,-4.4529,-.618;2.9977,-4.5094,.6791;3.1471,-3.4511,1.5706;3.7821,-2.2947,1.1357;4.4938,-3.2224,-2.0653;3.351,-5.2929,-1.2982;2.2598,-5.6976,1.1093;2.741,-3.5326,2.5799;3.8763,-1.447,1.816;-.491,4.0216,.0408;-1.862,3.8097,-.02;-2.4023,3.2855,-1.1892;-1.6134,2.9978,-2.3002;-.2428,3.208,-2.2198;-.0442,4.3889,.9679;-2.5093,4.0228,.8313;-3.8381,2.9994,-1.243;-2.0746,2.6001,-3.205;.3894,2.9587,-3.0735;2.1657,-5.9094,2.2973;1.7661,-6.3996,.2456;-4.3237,2.7244,-2.319;-4.4632,3.0356,-.1997;6.6256,.1644,-2.0233;5.9491,1.4111,-1.8855;7.8062,.0933,-2.8133;8.2833,1.2006,-3.4696;8.3221,-.868,-2.899;9.1889,1.1337,-4.0787;6.4515,2.5317,-2.6048;7.5867,2.4292,-3.3725;5.9195,3.4836,-2.5495;7.9514,3.3037,-3.9187;4.5784,3.9068,-.2541;3.7596,5.0581,-.0624;5.928,3.9615,.1952;6.4451,5.1081,.7489;6.5579,3.0746,.1023;7.4849,5.124,1.0875;4.3274,6.2346,.5002;5.6428,6.2656,.8916;3.6896,7.1148,.6272;6.0681,7.1742,1.3269;-2.3517,-3.9297,-2.8735;-2.534,-4.9657,-2.549;-3.2243,-3.6045,-3.4709;-1.4769,-3.9234,-3.543;-1.6933,-1.596,-2.0914;-2.4292,-1.1207,-2.7651;-1.5287,-.9349,-1.2261;-.7439,-1.6397,-2.6487;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932012305</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000433981958 0.000065960539 0.022418726094 0.005288515112</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057134028 -0.000198370 0.000034747 0.000157388 0.000256828 0.000281019 0.000402537 0.000548900 0.000707415 0.000778573 0.000907236 0.001018183 0.001183797 0.001258730 0.001381956 0.001483951 0.001598083 0.001708143 0.001767536 0.002063806 0.002309851 0.002588532 0.002801334 0.003052686 0.003248340 0.003671551 0.003909788 0.004493085 0.004736474 0.004878127 0.005162964 0.005327833 0.006000087 0.006359490 0.006504030 0.006726980 0.006937803 0.007385949 0.008190821 0.008635317 0.008812683 0.009377670 0.009751714 0.009886336 0.010960285 0.011219435 0.011885588 0.012643001 0.013377221 0.013689427 0.013988271 0.014630464 0.014864031 0.015418830 0.015898171 0.016033742 0.016783579 0.018648849 0.019274233 0.019444672 0.020218582 0.020559928 0.021552636 0.021764799 0.022451033 0.022809346 0.023498183 0.023776608 0.024568036 0.025906861 0.026563889 0.027103105 0.027206194 0.027556872 0.028461248 0.028794776 0.029773305 0.031057852 0.031583029 0.034258888 0.034813068 0.036032894 0.039091020 0.039678853 0.042009252 0.045455106 0.046125124 0.046723332 0.048859513 0.049701109 0.050098700 0.050838603 0.051554540 0.052222084 0.052292960 0.052417171 0.053032180 0.053647785 0.055005764 0.056116731 0.056453969 0.056718999 0.057002400 0.057067978 0.057822796 0.058648653 0.059286302 0.059800944 0.061352561 0.062171457 0.062983923 0.064346690 0.064586231 0.065138377 0.066045698 0.067593026 0.067851178 0.069029572 0.070481845 0.071404278 0.072236264 0.072612044 0.073014499 0.073080230 0.078678761 0.080367512 0.081881216 0.082504997 0.083507566 0.084646889 0.089137224 0.089488750 0.089830473 0.091346559 0.093342784 0.094585154 0.095505712 0.096302574 0.096874552 0.098575393 0.100198519 0.100709037 0.102820532 0.104008551 0.104764655 0.106973104 0.109555551 0.111107547 0.112521435 0.112915861 0.114035156 0.114945121 0.117024701 0.117452641 0.118632955 0.119195867 0.120693184 0.122233563 0.125092182 0.125863347 0.128734935 0.129067271 0.131090479 0.133896421 0.136993528 0.137955127 0.138628729 0.139740998 0.140407679 0.143423721 0.144565233 0.145899414 0.146818399 0.152007862 0.153603324 0.154124719 0.159593333 0.160840511 0.168581961 0.171478897 0.176650150 0.179220309 0.181656879 0.184539157 0.189218628 0.190761962 0.191998123 0.201387262 0.202258849 0.206370613 0.206970002 0.207273183 0.212509886 0.212902773 0.215641011 0.217009066 0.220431931 0.220939974 0.224632275 0.225153304 0.227207905 0.231919185 0.234615244 0.236271683 0.238591288 0.246325696 0.248461512 0.252775194 0.256611886 0.257247780 0.258355911 0.262587064 0.271604681 0.282928843 0.292057052 0.300149339 0.300278193 0.301136101 0.307207176 0.307811287 0.309863063 0.319994612 0.321411782 0.326510369 0.330965809 0.336687302 0.347773988 0.352031899 0.355653118 0.360882878 0.362165460 0.364156911 0.384578140 0.407526916 0.414456165 0.430333640 0.431708053 0.435458106 0.451171587 0.464797503 0.475693593 0.479022370 0.480512327 0.486694636 0.498908199 0.503876746 0.515261778 0.518062041 0.544008742 0.566946215 0.567741373 0.586899117 0.591792994 0.606081246 0.644310513 0.645762291 0.668147133 0.675650801 0.687428484 0.703735003 0.704145080 0.704433312 0.711534657 0.717309578 0.734361102 0.738044314 0.739781193 0.747100868 0.750883118 0.771628570 0.775995686 0.809411083 0.821877174 0.824307655 0.828956783 0.834350440 0.848403403 0.849604390 0.851430304 0.854727105 0.863532398 0.867478053 0.876007999 0.887598186 0.891382339 0.892342571 0.893791537 0.902139208 0.910647252 0.918003972 0.922686387 0.924571686 0.932037602 0.936177160 0.956167102 0.962744212 0.965411137 0.970124616 0.977280005 0.982591829 0.998709007 1.013106119 1.016314366 1.021980683 1.040329197 1.055322166 1.071409445 1.073133551 1.080607622 1.087611740 1.108568869 1.110442335 1.118319938 1.119317137 1.122638712 1.124017713 1.141934593 1.150105948 1.161783170 1.170200593 1.177515162 1.189068414 1.200835931 1.222196136 1.234293928 1.258299146 1.296538091 1.299702569 1.314782152 1.326482980 1.327492402 1.330355485 1.331481051 1.334847264 1.342593286 1.349264717 1.369233005 1.380018444 1.381350608 1.381926742 1.429511822 1.512754989 1.557999928 1.684868844 1.922886474</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">304</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92191944" y3="-0.95359798" z3="-0.68175249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60422673" y3="-1.94943306" z3="-1.55042104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08628542" y3="-0.99525888" z3="-1.41319749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77549422" y3="1.47776962" z3="-1.06874459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29029205" y3="0.31205592" z3="-0.50118391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65454585" y3="2.73609156" z3="-1.15408424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00495974" y3="2.73553386" z3="-0.85201104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37811724" y3="4.99422106" z3="-0.38160117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8072521" y3="3.85068032" z3="-0.88856182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75148359" y3="5.87015754" z3="-0.18304662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08830336" y3="1.60908092" z3="-1.67520618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1320445" y3="0.3595667" z3="0.21966867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71606134" y3="0.3816281" z3="-0.63438047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61300612" y3="0.72953058" z3="0.29593067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66662342" y3="-0.85989875" z3="-1.49688668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09743067" y3="-2.47701051" z3="-1.31722861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03405455" y3="-5.49520448" z3="-6.26714595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.765233" y3="-5.06012746" z3="-5.30033207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06029532" y3="-3.91786253" z3="-2.84572587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73421809" y3="-3.67953617" z3="-5.15329658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47247476" y3="-5.88617443" z3="-4.21232145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13454095" y3="-5.308954" z3="-2.99470113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39085501" y3="-3.07669619" z3="-3.9326802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96955364" y3="-3.01272327" z3="-5.98645001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52098903" y3="-6.97400221" z3="-4.30579632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94390915" y3="-5.94163861" z3="-2.12369812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65500929" y3="-3.36862834" z3="-1.6024352">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34699832" y3="-3.85100911" z3="-0.85830728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69144687" y3="-4.85241092" z3="-1.12933991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38461167" y3="-3.5518327" z3="0.59066544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42843888" y3="-3.08151704" z3="3.34983058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70097217" y3="-4.58691442" z3="1.47925716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10917703" y3="-2.27682492" z3="1.09487747">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1277001" y3="-2.04424316" z3="2.46581968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71448979" y3="-4.35392826" z3="2.85321454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89619773" y3="-5.59241843" z3="1.0962279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10681268" y3="-1.43658802" z3="0.43391734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10219987" y3="-1.03842787" z3="2.82771744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92744441" y3="-5.17860895" z3="3.53898701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43245301" y3="-2.90254299" z3="4.42899311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34614794" y3="-1.74080937" z3="-3.90297669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4769175" y3="-1.33542479" z3="-3.00008185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.336522" y3="3.70873675" z3="-1.04185574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12871491" y3="-2.97929483" z3="-1.71125996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91923118" y3="-3.1589606" z3="-0.5720325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11076277" y3="-2.28753418" z3="0.36356232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83433954" y3="-0.72103581" z3="0.62379929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70042229" y3="-0.24990793" z3="-0.96018464">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52399015" y3="0.45182603" z3="1.21236945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0728147" y3="-1.06147321" z3="1.98458225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40797895" y3="-4.36926662" z3="-0.34374453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13176563" y3="-4.61069363" z3="0.85333609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00344947" y3="0.05354763" z3="-1.75709456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36734668" y3="0.6105084" z3="-0.76999659">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3202209" y3="-1.08147694" z3="-1.34169496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63593612" y3="0.55494379" z3="0.56222727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15989273" y3="0.14404811" z3="2.2081827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99133178" y3="1.44877576" z3="1.31515673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53477086" y3="-0.11414141" z3="2.31699028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88524099" y3="-1.73055915" z3="1.65055976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57985432" y3="-1.52152663" z3="2.8593322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06776118" y3="-4.02825208" z3="0.86565536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52559054" y3="-4.35903585" z3="1.73698326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3631632" y3="-5.68431764" z3="0.84394854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28413129" y3="-2.19498456" z3="-0.17063298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13916409" y3="-3.29312799" z3="-1.03061459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49353649" y3="-4.45067813" z3="-0.61268089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.9976518" y3="-4.50495103" z3="0.68443651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14911099" y3="-3.4460541" z3="1.57476707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7857816" y3="-2.2910713" z3="1.13838106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49484912" y3="-3.22312924" z3="-2.06183453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35038981" y3="-5.29192925" z3="-1.29174611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25731089" y3="-5.69151132" z3="1.11605273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74328851" y3="-3.52598425" z3="2.58426945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8814762" y3="-1.44296225" z3="1.81776127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.4900004" y3="4.01821348" z3="0.04676469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86114123" y3="3.80677182" z3="-0.01233137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40340397" y3="3.28467838" z3="-1.18159901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61614009" y3="2.99790552" z3="-2.29403583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24532158" y3="3.20755053" z3="-2.21537667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04165665" y3="4.38406116" z3="0.97372557">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50711337" y3="4.01889155" z3="0.84027694">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83949358" y3="2.99982919" z3="-1.23400934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07886091" y3="2.60182676" z3="-3.1987638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38552336" y3="2.95942532" z3="-3.07059218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16110936" y3="-5.90074125" z3="2.30438411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76393864" y3="-6.39453056" z3="0.25305059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32621917" y3="2.72536678" z3="-2.30971164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46378798" y3="3.03666193" z3="-0.1902092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62444188" y3="0.1645652" z3="-2.0283797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9478041" y3="1.41122874" z3="-1.89051472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8029418" y3="0.09290591" z3="-2.82149876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27775005" y3="1.19958302" z3="-3.4805719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31903713" y3="-0.86828863" z3="-2.9075132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18169948" y3="1.13216135" z3="-4.09226633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44791981" y3="2.53113343" z3="-2.61240898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58103582" y3="2.42813882" z3="-3.38311072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91572003" y3="3.48291822" z3="-2.55670583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94396313" y3="3.30208772" z3="-3.93141574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57946195" y3="3.90786648" z3="-0.25873882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76018444" y3="5.05855252" z3="-0.06582604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92988927" y3="3.96384544" z3="0.18764408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44729987" y3="5.11108021" z3="0.73953935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55993249" y3="3.07761318" z3="0.09509754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48775012" y3="5.12801038" z3="1.07601962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32799705" y3="6.23563582" z3="0.49564457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64431637" y3="6.26792272" z3="0.88385999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6895151" y3="7.11527605" z3="0.62477215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06964168" y3="7.17690224" z3="1.31829913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34569563" y3="-3.92110952" z3="-2.87916996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53003834" y3="-4.95785888" z3="-2.55939346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21659566" y3="-3.59324805" z3="-3.4780225">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46933775" y3="-3.91356461" z3="-3.54654178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68703316" y3="-1.59057324" z3="-2.08750547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42193291" y3="-1.11110371" z3="-2.75926595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52105521" y3="-0.93342515" z3="-1.21952606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73734259" y3="-1.63409471" z3="-2.64460571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9219,-.9536,-.6818;6.6042,-1.9494,-1.5504;6.0863,-.9953,-1.4132;4.7755,1.4778,-1.0687;4.2903,.3121,-.5012;2.6545,2.7361,-1.1541;4.005,2.7355,-.852;2.3781,4.9942,-.3816;1.8073,3.8507,-.8886;1.7515,5.8702,-.183;2.0883,1.6091,-1.6752;3.132,.3596,.2197;1.7161,.3816,-.6344;.613,.7295,.2959;1.6666,-.8599,-1.4969;1.0974,-2.477,-1.3172;2.0341,-5.4952,-6.2671;1.7652,-5.0601,-5.3003;1.0603,-3.9179,-2.8457;1.7342,-3.6795,-5.1533;1.4725,-5.8862,-4.2123;1.1345,-5.309,-2.9947;1.3909,-3.0767,-3.9327;1.9696,-3.0127,-5.9865;1.521,-6.974,-4.3058;.9439,-5.9416,-2.1237;.655,-3.3686,-1.6024;-.347,-3.851,-.8583;-.6914,-4.8524,-1.1293;-.3846,-3.5518,.5907;-.4284,-3.0815,3.3498;-.701,-4.5869,1.4793;-.1092,-2.2768,1.0949;-.1277,-2.0442,2.4658;-.7145,-4.3539,2.8532;-.8962,-5.5924,1.0962;.1068,-1.4366,.4339;.1022,-1.0384,2.8277;-.9274,-5.1786,3.539;-.4325,-2.9025,4.429;1.3461,-1.7408,-3.903;1.4769,-1.3354,-3.0001;.3365,3.7087,-1.0419;-2.1287,-2.9793,-1.7113;-2.9192,-3.159,-.572;-3.1108,-2.2875,.3636;-3.8343,-.721,.6238;-4.7004,-.2499,-.9602;-2.524,.4518,1.2124;-5.0728,-1.0615,1.9846;-3.408,-4.3693,-.3437;-4.1318,-4.6107,.8533;-4.0034,.0535,-1.7571;-5.3673,.6105,-.77;-5.3202,-1.0815,-1.3417;-1.6359,.5549,.5622;-2.1599,.144,2.2082;-2.9913,1.4488,1.3152;-5.5348,-.1141,2.317;-5.8852,-1.7306,1.6506;-4.5799,-1.5215,2.8593;-5.0678,-4.0283,.8657;-3.5256,-4.359,1.737;-4.3632,-5.6843,.8439;4.2841,-2.195,-.1706;4.1392,-3.2931,-1.0306;3.4935,-4.4507,-.6127;2.9977,-4.505,.6844;3.1491,-3.4461,1.5748;3.7858,-2.2911,1.1384;4.4948,-3.2231,-2.0618;3.3504,-5.2919,-1.2917;2.2573,-5.6915,1.1161;2.7433,-3.526,2.5843;3.8815,-1.443,1.8178;-.49,4.0182,.0468;-1.8611,3.8068,-.0123;-2.4034,3.2847,-1.1816;-1.6161,2.9979,-2.294;-.2453,3.2076,-2.2154;-.0417,4.3841,.9737;-2.5071,4.0189,.8403;-3.8395,2.9998,-1.234;-2.0789,2.6018,-3.1988;.3855,2.9594,-3.0706;2.1611,-5.9007,2.3044;1.7639,-6.3945,.2531;-4.3262,2.7254,-2.3097;-4.4638,3.0367,-.1902;6.6244,.1646,-2.0284;5.9478,1.4112,-1.8905;7.8029,.0929,-2.8215;8.2778,1.1996,-3.4806;8.319,-.8683,-2.9075;9.1817,1.1322,-4.0923;6.4479,2.5311,-2.6124;7.581,2.4281,-3.3831;5.9157,3.4829,-2.5567;7.944,3.3021,-3.9314;4.5795,3.9079,-.2587;3.7602,5.0586,-.0658;5.9299,3.9638,.1876;6.4473,5.1111,.7395;6.5599,3.0776,.0951;7.4878,5.128,1.076;4.328,6.2356,.4956;5.6443,6.2679,.8839;3.6895,7.1153,.6248;6.0696,7.1769,1.3183;-2.3457,-3.9211,-2.8792;-2.53,-4.9579,-2.5594;-3.2166,-3.5932,-3.478;-1.4693,-3.9136,-3.5465;-1.687,-1.5906,-2.0875;-2.4219,-1.1111,-2.7593;-1.5211,-.9334,-1.2195;-.7373,-1.6341,-2.6446;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929535800</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000778691627 0.000137100548 0.018123741303 0.005190227019</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057134767 -0.000138207 0.000039554 0.000147215 0.000252089 0.000278096 0.000409109 0.000548497 0.000706600 0.000777180 0.000905860 0.001018104 0.001183851 0.001258013 0.001381911 0.001483995 0.001598124 0.001708450 0.001767561 0.002064160 0.002309909 0.002589421 0.002801363 0.003052877 0.003248052 0.003671937 0.003909736 0.004492412 0.004736000 0.004878114 0.005162927 0.005329218 0.005999136 0.006359646 0.006505037 0.006729235 0.006939996 0.007385986 0.008190818 0.008635391 0.008812703 0.009378141 0.009752940 0.009886525 0.010960289 0.011219598 0.011886946 0.012643243 0.013377489 0.013689748 0.013988222 0.014630425 0.014864086 0.015418757 0.015898439 0.016033476 0.016783599 0.018648998 0.019274813 0.019445023 0.020218758 0.020559896 0.021553250 0.021765636 0.022452208 0.022809625 0.023499655 0.023776362 0.024568390 0.025906875 0.026565654 0.027103431 0.027210573 0.027566625 0.028472658 0.028796154 0.029773951 0.031059618 0.031583364 0.034259354 0.034813171 0.036032888 0.039092809 0.039679615 0.042010073 0.045455928 0.046126236 0.046724252 0.048860136 0.049701106 0.050098847 0.050838590 0.051554632 0.052222880 0.052293157 0.052417348 0.053032701 0.053648337 0.055006130 0.056116784 0.056454180 0.056719201 0.057002718 0.057067658 0.057823301 0.058649531 0.059287796 0.059801404 0.061352623 0.062171436 0.062984476 0.064346681 0.064586435 0.065138891 0.066046102 0.067596071 0.067852173 0.069029683 0.070481726 0.071405697 0.072237379 0.072612145 0.073018668 0.073082893 0.078679433 0.080368761 0.081882441 0.082507159 0.083508284 0.084647757 0.089140148 0.089490112 0.089831074 0.091346696 0.093343582 0.094585203 0.095506321 0.096303122 0.096874597 0.098575558 0.100199559 0.100708938 0.102820718 0.104008668 0.104766199 0.106975373 0.109570776 0.111107552 0.112524357 0.112920065 0.114036222 0.114951729 0.117024795 0.117453465 0.118634083 0.119196028 0.120693716 0.122234308 0.125092425 0.125864216 0.128737490 0.129067517 0.131092685 0.133896444 0.136996929 0.137957874 0.138631471 0.139742485 0.140407487 0.143423818 0.144565305 0.145899613 0.146818496 0.152008015 0.153602855 0.154124921 0.159593587 0.160840336 0.168583090 0.171480062 0.176654957 0.179222260 0.181658661 0.184539320 0.189219664 0.190764027 0.191999186 0.201389308 0.202259617 0.206371112 0.206970071 0.207273223 0.212510158 0.212912074 0.215641057 0.217009014 0.220432336 0.220940543 0.224634296 0.225154165 0.227207921 0.231919377 0.234616198 0.236271858 0.238591955 0.246325848 0.248463836 0.252778754 0.256614073 0.257248361 0.258356077 0.262587430 0.271605382 0.282928861 0.292058192 0.300149633 0.300278309 0.301136414 0.307208262 0.307811665 0.309863088 0.319995813 0.321411962 0.326510909 0.330965924 0.336687618 0.347775478 0.352032944 0.355653361 0.360885180 0.362166706 0.364156968 0.384578679 0.407544735 0.414458665 0.430333721 0.431708314 0.435461476 0.451172341 0.464803611 0.475695885 0.479022548 0.480512645 0.486710227 0.498908282 0.503877051 0.515263767 0.518062771 0.544016215 0.566946304 0.567742527 0.586903594 0.591793203 0.606090064 0.644311015 0.645775542 0.668149155 0.675651926 0.687429023 0.703736160 0.704145337 0.704435926 0.711561031 0.717312950 0.734362669 0.738044732 0.739781161 0.747101232 0.750886541 0.771629250 0.775996023 0.809411777 0.821878775 0.824313703 0.828957223 0.834351488 0.848404576 0.849606487 0.851431267 0.854736885 0.863534268 0.867478056 0.876010570 0.887598247 0.891385336 0.892345894 0.893796996 0.902139800 0.910648119 0.918003973 0.922687459 0.924571767 0.932038459 0.936185903 0.956170121 0.962744981 0.965411839 0.970125089 0.977284946 0.982592258 0.998714950 1.013107035 1.016315324 1.021984090 1.040329395 1.055339637 1.071416833 1.073136205 1.080628494 1.087615663 1.108569261 1.110442414 1.118320065 1.119317549 1.122639000 1.124020676 1.141937314 1.150117267 1.161783226 1.170200938 1.177525687 1.189070625 1.200837161 1.222203467 1.234294228 1.258300707 1.296539504 1.299735013 1.314784184 1.326482988 1.327492626 1.330360002 1.331481332 1.334848233 1.342600125 1.349265998 1.369234860 1.380018407 1.381350670 1.381928949 1.429512302 1.512757566 1.558001067 1.684869048 1.922891589</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">305</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92653019" y3="-0.95269477" z3="-0.67860086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61064801" y3="-1.94770851" z3="-1.5445855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09189868" y3="-0.99381802" z3="-1.408404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77813405" y3="1.47828499" z3="-1.06748351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29361193" y3="0.31250669" z3="-0.49947454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65546889" y3="2.73380124" z3="-1.15591781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00567318" y3="2.73536733" z3="-0.85277098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37571475" y3="4.99318052" z3="-0.38764">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.8066024" y3="3.84789497" z3="-0.89270237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7486203" y3="5.86842683" z3="-0.19525082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09111401" y3="1.60556885" z3="-1.67656991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13463293" y3="0.35929188" z3="0.22025935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71958379" y3="0.37826476" z3="-0.63527927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6148964" y3="0.72500888" z3="0.29351251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67325055" y3="-0.86392204" z3="-1.49697172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09870464" y3="-2.47941887" z3="-1.31741348">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02617923" y3="-5.49478465" z3="-6.27109605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75905138" y3="-5.06005564" z3="-5.30364407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05847068" y3="-3.91872642" z3="-2.84723695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72959394" y3="-3.6795742" z3="-5.15562564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46704717" y3="-5.88650128" z3="-4.21574461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13134959" y3="-5.30973157" z3="-2.99728977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38841426" y3="-3.07719154" z3="-3.93412583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96454861" y3="-3.0125155" z3="-5.98869469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51445682" y3="-6.97429527" z3="-4.30996152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94133752" y3="-5.94266366" z3="-2.12629783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65499916" y3="-3.37088808" z3="-1.60264914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34881911" y3="-3.85103513" z3="-0.86042668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69519277" y3="-4.85143913" z3="-1.1331782">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3866548" y3="-3.55447264" z3="0.58923512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.43359583" y3="-3.09092455" z3="3.34988618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70844578" y3="-4.59024991" z3="1.47507664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10672581" y3="-2.28231803" z3="1.09710917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12741879" y3="-2.05271764" z3="2.46859019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.72351578" y3="-4.36064909" z3="2.84958862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.90555593" y3="-5.59538723" z3="1.08996882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11356645" y3="-1.44113939" z3="0.43862634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1052736" y3="-1.04855545" z3="2.83337144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.94154626" y3="-5.18586093" z3="3.53243683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.43935005" y3="-2.91418616" z3="4.42942801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34513752" y3="-1.74123443" z3="-3.90348624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47883253" y3="-1.33696542" z3="-3.00048549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33627925" y3="3.70441378" z3="-1.04701309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12836654" y3="-2.9734684" z3="-1.71078235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91981609" y3="-3.15561249" z3="-0.57228531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10917083" y3="-2.28788971" z3="0.36705559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83183442" y3="-0.72133622" z3="0.63155531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70483994" y3="-0.25135305" z3="-0.94857202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52035171" y3="0.45298565" z3="1.21425978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06359977" y3="-1.06290087" z3="1.99816082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41156333" y3="-4.36579207" z3="-0.3489241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1374727" y3="-4.61005818" z3="0.8464356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.01118305" y3="0.04795599" z3="-1.74966944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36846231" y3="0.61134612" z3="-0.75721778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.3286619" y3="-1.08229715" z3="-1.32450124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63298535" y3="0.55419972" z3="0.56294002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15505201" y3="0.14837974" z3="2.21046299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98722249" y3="1.45030969" z3="1.31463619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52462699" y3="-0.11597617" z3="2.3325896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87713814" y3="-1.73292186" z3="1.6686835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.56569014" y3="-1.52237174" z3="2.87043002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.07201116" y3="-4.0257879" z3="0.85947838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.53147946" y3="-4.36129455" z3="1.7316406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37120371" y3="-5.68284237" z3="0.83312548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28832627" y3="-2.19424781" z3="-0.16827093">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14174303" y3="-3.29135299" z3="-1.02948017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49405015" y3="-4.44821126" z3="-0.61290867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99798104" y3="-4.50290551" z3="0.68413643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15138942" y3="-3.44530632" z3="1.57575622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79016471" y3="-2.29102112" z3="1.14072871">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49734346" y3="-3.22059917" z3="-2.06067947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34861449" y3="-5.28772116" z3="-1.29312526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25508867" y3="-5.68820295" z3="1.1142031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74511834" y3="-3.5254957" z3="2.58507341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88739506" y3="-1.4437806" z3="1.82108473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49128286" y3="4.01977228" z3="0.03913695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86232759" y3="3.80790298" z3="-0.01995386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40356569" y3="3.2793886" z3="-1.18672935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61534472" y3="2.98645014" z3="-2.29684772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24462952" y3="3.19664684" z3="-2.21828719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0438681" y3="4.39102317" z3="0.96433086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50907086" y3="4.02483252" z3="0.83073913">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83977056" y3="2.9950151" z3="-1.23906788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07724448" y3="2.58533373" z3="-3.19978028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38702737" y3="2.94336063" z3="-3.07116047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.15702892" y3="-5.89766727" z3="2.30224271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.761839" y3="-6.39012531" z3="0.25032457">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32600755" y3="2.71640294" z3="-2.31380029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46454201" y3="3.03629523" z3="-0.19565373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62999366" y3="0.16621683" z3="-2.02326157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95173648" y3="1.41224256" z3="-1.88755517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81017655" y3="0.09531057" z3="-2.81387904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2851959" y3="1.20204781" z3="-3.47267233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32753744" y3="-0.8653352" z3="-2.89803111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19059494" y3="1.13525802" z3="-4.08222815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45195866" y3="2.53205908" z3="-2.60950752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5868068" y3="2.42979532" z3="-3.37772475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91854675" y3="3.48323656" z3="-2.55589442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94986771" y3="3.30372019" z3="-3.92596082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5779398" y3="3.90936943" z3="-0.26045812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75724894" y3="5.0596714" z3="-0.07050598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92801796" y3="3.96758638" z3="0.18703195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44359708" y3="5.11639439" z3="0.73759388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55959148" y3="3.08150587" z3="0.09457394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48384481" y3="5.13500768" z3="1.07489955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32365224" y3="6.23857394" z3="0.48850051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6393772" y3="6.27286689" z3="0.87847736">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68457522" y3="7.11785966" z3="0.61343727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0635845" y3="7.18326476" z3="1.31099981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34773934" y3="-3.9099243" z3="-2.88228045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53290715" y3="-4.94805019" z3="-2.56614049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21852197" y3="-3.57813528" z3="-3.47864002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47171534" y3="-3.90037275" z3="-3.55000133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68355232" y3="-1.58465677" z3="-2.08188487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41744468" y3="-1.10107978" z3="-2.75193339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5160796" y3="-0.93080615" z3="-1.21160231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73474591" y3="-1.62840716" z3="-2.63997356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9265,-.9527,-.6786;6.6106,-1.9477,-1.5446;6.0919,-.9938,-1.4084;4.7781,1.4783,-1.0675;4.2936,.3125,-.4995;2.6555,2.7338,-1.1559;4.0057,2.7354,-.8528;2.3757,4.9932,-.3876;1.8066,3.8479,-.8927;1.7486,5.8684,-.1953;2.0911,1.6056,-1.6766;3.1346,.3593,.2203;1.7196,.3783,-.6353;.6149,.725,.2935;1.6733,-.8639,-1.497;1.0987,-2.4794,-1.3174;2.0262,-5.4948,-6.2711;1.7591,-5.0601,-5.3036;1.0585,-3.9187,-2.8472;1.7296,-3.6796,-5.1556;1.467,-5.8865,-4.2157;1.1313,-5.3097,-2.9973;1.3884,-3.0772,-3.9341;1.9645,-3.0125,-5.9887;1.5145,-6.9743,-4.31;.9413,-5.9427,-2.1263;.655,-3.3709,-1.6026;-.3488,-3.851,-.8604;-.6952,-4.8514,-1.1332;-.3867,-3.5545,.5892;-.4336,-3.0909,3.3499;-.7084,-4.5902,1.4751;-.1067,-2.2823,1.0971;-.1274,-2.0527,2.4686;-.7235,-4.3606,2.8496;-.9056,-5.5954,1.09;.1136,-1.4411,.4386;.1053,-1.0486,2.8334;-.9415,-5.1859,3.5324;-.4394,-2.9142,4.4294;1.3451,-1.7412,-3.9035;1.4788,-1.337,-3.0005;.3363,3.7044,-1.047;-2.1284,-2.9735,-1.7108;-2.9198,-3.1556,-.5723;-3.1092,-2.2879,.3671;-3.8318,-.7213,.6316;-4.7048,-.2514,-.9486;-2.5204,.453,1.2143;-5.0636,-1.0629,1.9982;-3.4116,-4.3658,-.3489;-4.1375,-4.6101,.8464;-4.0112,.048,-1.7497;-5.3685,.6113,-.7572;-5.3287,-1.0823,-1.3245;-1.633,.5542,.5629;-2.1551,.1484,2.2105;-2.9872,1.4503,1.3146;-5.5246,-.116,2.3326;-5.8771,-1.7329,1.6687;-4.5657,-1.5224,2.8704;-5.072,-4.0258,.8595;-3.5315,-4.3613,1.7316;-4.3712,-5.6828,.8331;4.2883,-2.1942,-.1683;4.1417,-3.2914,-1.0295;3.4941,-4.4482,-.6129;2.998,-4.5029,.6841;3.1514,-3.4453,1.5758;3.7902,-2.291,1.1407;4.4973,-3.2206,-2.0607;3.3486,-5.2877,-1.2931;2.2551,-5.6882,1.1142;2.7451,-3.5255,2.5851;3.8874,-1.4438,1.8211;-.4913,4.0198,.0391;-1.8623,3.8079,-.02;-2.4036,3.2794,-1.1867;-1.6153,2.9865,-2.2968;-.2446,3.1966,-2.2183;-.0439,4.391,.9643;-2.5091,4.0248,.8307;-3.8398,2.995,-1.2391;-2.0772,2.5853,-3.1998;.387,2.9434,-3.0712;2.157,-5.8977,2.3022;1.7618,-6.3901,.2503;-4.326,2.7164,-2.3138;-4.4645,3.0363,-.1957;6.63,.1662,-2.0233;5.9517,1.4122,-1.8876;7.8102,.0953,-2.8139;8.2852,1.202,-3.4727;8.3275,-.8653,-2.898;9.1906,1.1353,-4.0822;6.452,2.5321,-2.6095;7.5868,2.4298,-3.3777;5.9185,3.4832,-2.5559;7.9499,3.3037,-3.926;4.5779,3.9094,-.2605;3.7572,5.0597,-.0705;5.928,3.9676,.187;6.4436,5.1164,.7376;6.5596,3.0815,.0946;7.4838,5.135,1.0749;4.3237,6.2386,.4885;5.6394,6.2729,.8785;3.6846,7.1179,.6134;6.0636,7.1833,1.311;-2.3477,-3.9099,-2.8823;-2.5329,-4.9481,-2.5661;-3.2185,-3.5781,-3.4786;-1.4717,-3.9004,-3.55;-1.6836,-1.5847,-2.0819;-2.4174,-1.1011,-2.7519;-1.5161,-.9308,-1.2116;-.7347,-1.6284,-2.64;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662926942377</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000700279636 0.000131492108 0.019546007806 0.005345249075</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057135836 -0.000103788 0.000067865 0.000162242 0.000266480 0.000278843 0.000406719 0.000549309 0.000708399 0.000777220 0.000906200 0.001018054 0.001183828 0.001257926 0.001382081 0.001484137 0.001598323 0.001708477 0.001767381 0.002063793 0.002309822 0.002591733 0.002801323 0.003054637 0.003247881 0.003672010 0.003909882 0.004494187 0.004735736 0.004878441 0.005163103 0.005329423 0.005999041 0.006360029 0.006506123 0.006732332 0.006940947 0.007386012 0.008190806 0.008635838 0.008812784 0.009378596 0.009754056 0.009887120 0.010960240 0.011219713 0.011889365 0.012643357 0.013377617 0.013690435 0.013988388 0.014630632 0.014864583 0.015419244 0.015898623 0.016033597 0.016783652 0.018649265 0.019277611 0.019445343 0.020219654 0.020560104 0.021554149 0.021765745 0.022453691 0.022810021 0.023502235 0.023777409 0.024569296 0.025906901 0.026568464 0.027103811 0.027215734 0.027581557 0.028489766 0.028796570 0.029778149 0.031062794 0.031583509 0.034260075 0.034813333 0.036032942 0.039094293 0.039681104 0.042010847 0.045458198 0.046126977 0.046727140 0.048861230 0.049701115 0.050099337 0.050838646 0.051554754 0.052224168 0.052293488 0.052417696 0.053033620 0.053649018 0.055007261 0.056116874 0.056454352 0.056719301 0.057002863 0.057068803 0.057824594 0.058651058 0.059289470 0.059802462 0.061352693 0.062171457 0.062985456 0.064346707 0.064586736 0.065139847 0.066046971 0.067602151 0.067852737 0.069029787 0.070482781 0.071405668 0.072238211 0.072612248 0.073022804 0.073089471 0.078679790 0.080369253 0.081883603 0.082515956 0.083508475 0.084648775 0.089144042 0.089492342 0.089831859 0.091346870 0.093344560 0.094585328 0.095507461 0.096303598 0.096874701 0.098576712 0.100200269 0.100709194 0.102820810 0.104008819 0.104769873 0.106977449 0.109590518 0.111107557 0.112526280 0.112926444 0.114036448 0.114961827 0.117024882 0.117454854 0.118634980 0.119196100 0.120694171 0.122235388 0.125092929 0.125866500 0.128740909 0.129068759 0.131095657 0.133896483 0.137001491 0.137960884 0.138633935 0.139744866 0.140407721 0.143423874 0.144565329 0.145900072 0.146818722 0.152008579 0.153604935 0.154125251 0.159593577 0.160840604 0.168584229 0.171481171 0.176660013 0.179224195 0.181660787 0.184539675 0.189221619 0.190765242 0.192000087 0.201391216 0.202260661 0.206371832 0.206970196 0.207273256 0.212510862 0.212926529 0.215641333 0.217009136 0.220432802 0.220942251 0.224636400 0.225155618 0.227207943 0.231919652 0.234617462 0.236272416 0.238593447 0.246326102 0.248467839 0.252783420 0.256616341 0.257249007 0.258356448 0.262587939 0.271606156 0.282928880 0.292059781 0.300150508 0.300278726 0.301136822 0.307209529 0.307812301 0.309863093 0.319998460 0.321412147 0.326511554 0.330966078 0.336688132 0.347778197 0.352034560 0.355653729 0.360887228 0.362167737 0.364157189 0.384579760 0.407575177 0.414460681 0.430333806 0.431708268 0.435467710 0.451173012 0.464817119 0.475701826 0.479022572 0.480513075 0.486728290 0.498908350 0.503877513 0.515268025 0.518065579 0.544029749 0.566946347 0.567744853 0.586910575 0.591793875 0.606100470 0.644313865 0.645795442 0.668152948 0.675654294 0.687429928 0.703736082 0.704147068 0.704441098 0.711599472 0.717318291 0.734365806 0.738045179 0.739781461 0.747101734 0.750892323 0.771630435 0.775996864 0.809412093 0.821881500 0.824323301 0.828958094 0.834352855 0.848405522 0.849608964 0.851433091 0.854754202 0.863537752 0.867478097 0.876013305 0.887598822 0.891397246 0.892348004 0.893800104 0.902140790 0.910648867 0.918004669 0.922688165 0.924571824 0.932039548 0.936202305 0.956173141 0.962750384 0.965413281 0.970126899 0.977285459 0.982594070 0.998725846 1.013107251 1.016317049 1.021989524 1.040329417 1.055367873 1.071429660 1.073140678 1.080650625 1.087620019 1.108570947 1.110442541 1.118320140 1.119317971 1.122639467 1.124025402 1.141942205 1.150134416 1.161783375 1.170201599 1.177542065 1.189073166 1.200838502 1.222213899 1.234294633 1.258303204 1.296542083 1.299782964 1.314787455 1.326483395 1.327494474 1.330366650 1.331481628 1.334849368 1.342613736 1.349267795 1.369235062 1.380018543 1.381350737 1.381932011 1.429513512 1.512759620 1.558001870 1.684869508 1.922893937</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">306</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92590019" y3="-0.95352548" z3="-0.67675513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61097346" y3="-1.94878286" z3="-1.54059177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09258932" y3="-0.99468623" z3="-1.40444302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77953783" y3="1.47781412" z3="-1.06371296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29333423" y3="0.31182542" z3="-0.49755335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65764907" y3="2.73385615" z3="-1.15750335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.0069876" y3="2.7350145" z3="-0.85074481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37662962" y3="4.99344118" z3="-0.39114985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80839621" y3="3.84823608" z3="-0.89730389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74880686" y3="5.86938666" z3="-0.19743825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09427842" y3="1.60559119" z3="-1.6788437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13301809" y3="0.35845829" z3="0.22008343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71950463" y3="0.37897003" z3="-0.63797544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61344911" y3="0.7270678" z3="0.2886878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67339261" y3="-0.86310064" z3="-1.49987965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09664024" y3="-2.47678946" z3="-1.32013583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01830808" y3="-5.4897106" z3="-6.27607179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75223779" y3="-5.0554394" z3="-5.30812656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05419409" y3="-3.91528807" z3="-2.85057969">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72164101" y3="-3.67496184" z3="-5.15987127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4626905" y3="-5.88237125" z3="-4.21995726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12816123" y3="-5.30621654" z3="-3.000843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38176189" y3="-3.07325194" z3="-3.93776403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95462707" y3="-3.00748563" z3="-5.99315056">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51103181" y3="-6.97009841" z3="-4.31451316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.9398772" y3="-5.93952202" z3="-2.12976265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65177212" y3="-3.3671805" z3="-1.6058228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3503923" y3="-3.8484869" z3="-0.86133588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69671988" y3="-4.84897899" z3="-1.13347539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.3852039" y3="-3.55198034" z3="0.58834707">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42579761" y3="-3.08707923" z3="3.34851472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70193143" y3="-4.58832401" z3="1.47521619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10757472" y3="-2.27839759" z3="1.09482315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12478262" y3="-2.04847754" z3="2.46624535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71364495" y3="-4.35815003" z3="2.84965178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89871944" y3="-5.59298868" z3="1.09045423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10872014" y3="-1.43695151" z3="0.43543923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10632627" y3="-1.04363331" z3="2.83008206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92691033" y3="-5.18390684" z3="3.53382405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42847919" y3="-2.91025167" z3="4.42802622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33690338" y3="-1.73734797" z3="-3.90639979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4734243" y3="-1.33378376" z3="-3.00352149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33837449" y3="3.70429983" z3="-1.05483873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13107692" y3="-2.97226743" z3="-1.70875909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92041664" y3="-3.15514078" z3="-0.56912424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1091333" y3="-2.28733132" z3="0.3703432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83377251" y3="-0.72237427" z3="0.63703584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71608631" y3="-0.25670832" z3="-0.93946569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52216279" y3="0.45650979" z3="1.21122577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05641923" y3="-1.06534743" z3="2.01144145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.41032211" y3="-4.36572514" z3="-0.34481201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1328433" y3="-4.61082217" z3="0.85225583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02623651" y3="0.03332545" z3="-1.74753566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37248424" y3="0.61164744" z3="-0.748715">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34820791" y3="-1.08592937" z3="-1.30556598">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63801062" y3="0.55850751" z3="0.55582117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15150987" y3="0.15487663" z3="2.20650172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99125578" y3="1.45289568" z3="1.31171371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51666601" y3="-0.11916647" z3="2.34947116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87107944" y3="-1.73641206" z3="1.68684584">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5521312" y3="-1.52439133" z3="2.88032891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06822483" y3="-4.0274951" z3="0.86778583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52526457" y3="-4.36276115" z3="1.73600959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36533778" y3="-5.68413466" z3="0.83923193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28633822" y3="-2.19528507" z3="-0.1687306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13962196" y3="-3.29086135" z3="-1.03167925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49217596" y3="-4.44846591" z3="-0.61681489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99674366" y3="-4.50552696" z3="0.68037876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14960775" y3="-3.4491321" z3="1.57341404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78768279" y3="-2.29380856" z3="1.13990775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49542295" y3="-3.21848528" z3="-2.06268749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34727886" y3="-5.28745338" z3="-1.29814004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2556889" y3="-5.6925635" z3="1.10934099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.743631" y3="-3.53116724" z3="2.58268704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88437666" y3="-1.44732949" z3="1.82129627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49222364" y3="4.02120458" z3="0.02854286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86284728" y3="3.80734665" z3="-0.03340094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40050225" y3="3.27510561" z3="-1.20024778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60923113" y3="2.98090161" z3="-2.30788368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23901158" y3="3.19334659" z3="-2.22642513">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04757097" y3="4.39484116" z3="0.95419236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51191909" y3="4.02515888" z3="0.81537823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83591605" y3="2.98740193" z3="-1.25477727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06829861" y3="2.57667292" z3="-3.21086748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39514318" y3="2.93898314" z3="-3.07732671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1592843" y3="-5.90424058" z3="2.29720336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76219941" y3="-6.39363259" z3="0.24485625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31857263" y3="2.70133201" z3="-2.32928892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46380472" y3="3.03398639" z3="-0.21350328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63251665" y3="0.16559003" z3="-2.01722497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9547249" y3="1.41188323" z3="-1.88154993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81398034" y3="0.09463186" z3="-2.80601166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29072461" y3="1.20162539" z3="-3.46312665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33088649" y3="-0.86628187" z3="-2.89022213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19705434" y3="1.13478067" z3="-4.07138193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45683115" y3="2.53202184" z3="-2.60170329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59290511" y3="2.42973235" z3="-3.36817774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92393207" y3="3.48351966" z3="-2.54804864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95736073" y3="3.30393545" z3="-3.91504187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57829528" y3="3.90902594" z3="-0.25776224">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75745918" y3="5.05955333" z3="-0.07054898">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92706426" y3="3.96701688" z3="0.19334594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44169071" y3="5.11594909" z3="0.74428079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55804441" y3="3.08097658" z3="0.10487532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48092333" y3="5.13445261" z3="1.08442748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32244715" y3="6.2384147" z3="0.49001681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63736101" y3="6.27257437" z3="0.88285386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68288716" y3="7.11796996" z3="0.61477729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06049795" y3="7.18293964" z3="1.31649951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35104319" y3="-3.90951092" z3="-2.87980156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53582517" y3="-4.94735929" z3="-2.56352795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22253543" y3="-3.57833751" z3="-3.47579439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47576121" y3="-3.90024458" z3="-3.54857045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68867452" y3="-1.58271573" z3="-2.08081864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42398326" y3="-1.1004957" z3="-2.75008322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52097613" y3="-0.92844057" z3="-1.21110461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73976295" y3="-1.6254378" z3="-2.63940435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9259,-.9535,-.6768;6.611,-1.9488,-1.5406;6.0926,-.9947,-1.4044;4.7795,1.4778,-1.0637;4.2933,.3118,-.4976;2.6576,2.7339,-1.1575;4.007,2.735,-.8507;2.3766,4.9934,-.3911;1.8084,3.8482,-.8973;1.7488,5.8694,-.1974;2.0943,1.6056,-1.6788;3.133,.3585,.2201;1.7195,.379,-.638;.6134,.7271,.2887;1.6734,-.8631,-1.4999;1.0966,-2.4768,-1.3201;2.0183,-5.4897,-6.2761;1.7522,-5.0554,-5.3081;1.0542,-3.9153,-2.8506;1.7216,-3.675,-5.1599;1.4627,-5.8824,-4.22;1.1282,-5.3062,-3.0008;1.3818,-3.0733,-3.9378;1.9546,-3.0075,-5.9932;1.511,-6.9701,-4.3145;.9399,-5.9395,-2.1298;.6518,-3.3672,-1.6058;-.3504,-3.8485,-.8613;-.6967,-4.849,-1.1335;-.3852,-3.552,.5883;-.4258,-3.0871,3.3485;-.7019,-4.5883,1.4752;-.1076,-2.2784,1.0948;-.1248,-2.0485,2.4662;-.7136,-4.3582,2.8497;-.8987,-5.593,1.0905;.1087,-1.437,.4354;.1063,-1.0436,2.8301;-.9269,-5.1839,3.5338;-.4285,-2.9103,4.428;1.3369,-1.7373,-3.9064;1.4734,-1.3338,-3.0035;.3384,3.7043,-1.0548;-2.1311,-2.9723,-1.7088;-2.9204,-3.1551,-.5691;-3.1091,-2.2873,.3703;-3.8338,-.7224,.637;-4.7161,-.2567,-.9395;-2.5222,.4565,1.2112;-5.0564,-1.0653,2.0114;-3.4103,-4.3657,-.3448;-4.1328,-4.6108,.8523;-4.0262,.0333,-1.7475;-5.3725,.6116,-.7487;-5.3482,-1.0859,-1.3056;-1.638,.5585,.5558;-2.1515,.1549,2.2065;-2.9913,1.4529,1.3117;-5.5167,-.1192,2.3495;-5.8711,-1.7364,1.6868;-4.5521,-1.5244,2.8803;-5.0682,-4.0275,.8678;-3.5253,-4.3628,1.736;-4.3653,-5.6841,.8392;4.2863,-2.1953,-.1687;4.1396,-3.2909,-1.0317;3.4922,-4.4485,-.6168;2.9967,-4.5055,.6804;3.1496,-3.4491,1.5734;3.7877,-2.2938,1.1399;4.4954,-3.2185,-2.0627;3.3473,-5.2875,-1.2981;2.2557,-5.6926,1.1093;2.7436,-3.5312,2.5827;3.8844,-1.4473,1.8213;-.4922,4.0212,.0285;-1.8628,3.8073,-.0334;-2.4005,3.2751,-1.2002;-1.6092,2.9809,-2.3079;-.239,3.1933,-2.2264;-.0476,4.3948,.9542;-2.5119,4.0252,.8154;-3.8359,2.9874,-1.2548;-2.0683,2.5767,-3.2109;.3951,2.939,-3.0773;2.1593,-5.9042,2.2972;1.7622,-6.3936,.2449;-4.3186,2.7013,-2.3293;-4.4638,3.034,-.2135;6.6325,.1656,-2.0172;5.9547,1.4119,-1.8815;7.814,.0946,-2.806;8.2907,1.2016,-3.4631;8.3309,-.8663,-2.8902;9.1971,1.1348,-4.0714;6.4568,2.532,-2.6017;7.5929,2.4297,-3.3682;5.9239,3.4835,-2.548;7.9574,3.3039,-3.915;4.5783,3.909,-.2578;3.7575,5.0596,-.0705;5.9271,3.967,.1933;6.4417,5.1159,.7443;6.558,3.081,.1049;7.4809,5.1345,1.0844;4.3224,6.2384,.49;5.6374,6.2726,.8829;3.6829,7.118,.6148;6.0605,7.1829,1.3165;-2.351,-3.9095,-2.8798;-2.5358,-4.9474,-2.5635;-3.2225,-3.5783,-3.4758;-1.4758,-3.9002,-3.5486;-1.6887,-1.5827,-2.0808;-2.424,-1.1005,-2.7501;-1.521,-.9284,-1.2111;-.7398,-1.6254,-2.6394;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928914286</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000499443778 0.000100944408 0.021439275892 0.005324240158</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057136732 -0.000065474 0.000040106 0.000152178 0.000262145 0.000279694 0.000407347 0.000548765 0.000708403 0.000777214 0.000906489 0.001018053 0.001183931 0.001257864 0.001381989 0.001484187 0.001598297 0.001708396 0.001767263 0.002063667 0.002309867 0.002591923 0.002801285 0.003055786 0.003248050 0.003671887 0.003910028 0.004493991 0.004735746 0.004878293 0.005163168 0.005330215 0.005999094 0.006360097 0.006507095 0.006736313 0.006941591 0.007386045 0.008190780 0.008635617 0.008812828 0.009378604 0.009755685 0.009887509 0.010960244 0.011219679 0.011891107 0.012643247 0.013377613 0.013691034 0.013988630 0.014631072 0.014864859 0.015420081 0.015898701 0.016033744 0.016783821 0.018649260 0.019280176 0.019445856 0.020220178 0.020560156 0.021554664 0.021765545 0.022455382 0.022810652 0.023504293 0.023777467 0.024569990 0.025906913 0.026570112 0.027104139 0.027219617 0.027591169 0.028500977 0.028797366 0.029779476 0.031066816 0.031583462 0.034260566 0.034813450 0.036033109 0.039094756 0.039681724 0.042010994 0.045459574 0.046127817 0.046729826 0.048861774 0.049701135 0.050099577 0.050838636 0.051554797 0.052224774 0.052293708 0.052417974 0.053033988 0.053649447 0.055007648 0.056116936 0.056454435 0.056719605 0.057003046 0.057069106 0.057825211 0.058651571 0.059290767 0.059803278 0.061352737 0.062171456 0.062985696 0.064346856 0.064586955 0.065140052 0.066047576 0.067605599 0.067853507 0.069029791 0.070483221 0.071405854 0.072240081 0.072612094 0.073026010 0.073094243 0.078680056 0.080369841 0.081885294 0.082521046 0.083508700 0.084649855 0.089146490 0.089493508 0.089832675 0.091346909 0.093345536 0.094585353 0.095508220 0.096304245 0.096874729 0.098577607 0.100200853 0.100709458 0.102821032 0.104008801 0.104772047 0.106978369 0.109601935 0.111107600 0.112526988 0.112930438 0.114036544 0.114967264 0.117025041 0.117455359 0.118636011 0.119196251 0.120694602 0.122236305 0.125093371 0.125867695 0.128742801 0.129069155 0.131097167 0.133896498 0.137004901 0.137962794 0.138634185 0.139747268 0.140407867 0.143424038 0.144565273 0.145900445 0.146818874 0.152009020 0.153606559 0.154125476 0.159593926 0.160841014 0.168584831 0.171481945 0.176661214 0.179225023 0.181662653 0.184539910 0.189222602 0.190765602 0.191999729 0.201391560 0.202260971 0.206372439 0.206970284 0.207273264 0.212511090 0.212933980 0.215641821 0.217009165 0.220433219 0.220943217 0.224638401 0.225156682 0.227208020 0.231919802 0.234618298 0.236272667 0.238594889 0.246327034 0.248473897 0.252784771 0.256617455 0.257249373 0.258357011 0.262588301 0.271606458 0.282928898 0.292060969 0.300151639 0.300279265 0.301137176 0.307210175 0.307812650 0.309863103 0.319999159 0.321412172 0.326511783 0.330966710 0.336688349 0.347780781 0.352036202 0.355653960 0.360889271 0.362168069 0.364157550 0.384580109 0.407592905 0.414462595 0.430333790 0.431708371 0.435471410 0.451173529 0.464829006 0.475705552 0.479022562 0.480513268 0.486742600 0.498908415 0.503877966 0.515269407 0.518066856 0.544035935 0.566946445 0.567746499 0.586914230 0.591794385 0.606105842 0.644314241 0.645804172 0.668154574 0.675654686 0.687430302 0.703737151 0.704147759 0.704442853 0.711625781 0.717321988 0.734367329 0.738045375 0.739781797 0.747102409 0.750896107 0.771631197 0.775997463 0.809412070 0.821882769 0.824326158 0.828958211 0.834353187 0.848406369 0.849610724 0.851434373 0.854762988 0.863539546 0.867478140 0.876014673 0.887598887 0.891400156 0.892352711 0.893801525 0.902141071 0.910649090 0.918005093 0.922688769 0.924571860 0.932040347 0.936213757 0.956177117 0.962751673 0.965413591 0.970127703 0.977287088 0.982594504 0.998732415 1.013107557 1.016318220 1.021993085 1.040329429 1.055385009 1.071436298 1.073142981 1.080660118 1.087621940 1.108573492 1.110442645 1.118320271 1.119318117 1.122639744 1.124028126 1.141944539 1.150141261 1.161783480 1.170202128 1.177550956 1.189074436 1.200838901 1.222218494 1.234294638 1.258303814 1.296543117 1.299805187 1.314789228 1.326483502 1.327494867 1.330371178 1.331482046 1.334849524 1.342620845 1.349268639 1.369234881 1.380018951 1.381350748 1.381933584 1.429513821 1.512767417 1.558002356 1.684869455 1.922896543</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">307</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92187007" y3="-0.95438039" z3="-0.6795211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60711383" y3="-1.95001221" z3="-1.54256203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08933443" y3="-0.99565483" z3="-1.40598044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77843416" y3="1.47759868" z3="-1.06320131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29010997" y3="0.31123268" z3="-0.49959918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65823393" y3="2.73622051" z3="-1.15805252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00700505" y3="2.73535344" z3="-0.84888132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37774618" y3="4.99427723" z3="-0.38650761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80946964" y3="3.85084707" z3="-0.89668611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75087035" y3="5.86997875" z3="-0.19454117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0949428" y3="1.60934196" z3="-1.68277334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12870794" y3="0.35788967" z3="0.21624788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71643931" y3="0.38216105" z3="-0.64387745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60988474" y3="0.73168252" z3="0.28169539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6691763" y3="-0.85900346" z3="-1.50700687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09442686" y3="-2.47339862" z3="-1.32437136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01162418" y3="-5.49029289" z3="-6.27847362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74657547" y3="-5.0554215" z3="-5.31053107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05138903" y3="-3.91384845" z3="-2.85280222">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71417087" y3="-3.67487524" z3="-5.16360634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46014528" y3="-5.88168698" z3="-4.22100914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12700392" y3="-5.30478972" z3="-3.00192051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37561539" y3="-3.07239741" z3="-3.94148057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94472212" y3="-3.00789588" z3="-5.99796886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50986642" y3="-6.96944504" z3="-4.31451796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94112286" y3="-5.9375303" z3="-2.12989204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65085098" y3="-3.36558819" z3="-1.60747312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34902979" y3="-3.84706663" z3="-0.8607109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69378906" y3="-4.84907395" z3="-1.12964047">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38165967" y3="-3.54652483" z3="0.58833774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41280443" y3="-3.07464668" z3="3.34779842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69082801" y3="-4.58162437" z3="1.47941703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10720835" y3="-2.27088291" z3="1.09042488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11989421" y3="-2.03708611" z3="2.46123882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69793288" y3="-4.34779596" z3="2.85336381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88400974" y3="-5.58914911" z3="1.09872431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10275419" y3="-1.43032979" z3="0.42786292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10875171" y3="-1.03022218" z3="2.82111635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90547105" y3="-5.17241323" z3="3.54026963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41212325" y3="-2.89461649" z3="4.42681666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.3288885" y3="-1.73649919" z3="-3.91164717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46662536" y3="-1.3315617" z3="-3.00956671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33980518" y3="3.70799662" z3="-1.05767159">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13413644" y3="-2.97675556" z3="-1.7075121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92034889" y3="-3.15784012" z3="-0.56526339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1092175" y3="-2.28748649" z3="0.37177447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83576282" y3="-0.72270304" z3="0.63549801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71963287" y3="-0.2600221" z3="-0.94062481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52506737" y3="0.45820634" z3="1.20691665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05747315" y3="-1.06494947" z3="2.01100831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40660836" y3="-4.36900792" z3="-0.33558873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12449053" y3="-4.6122898" z3="0.86482585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03076814" y3="0.02712677" z3="-1.7503646">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37448967" y3="0.60976255" z3="-0.7509149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35319082" y3="-1.08948304" z3="-1.30349823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64200033" y3="0.56138299" z3="0.55010086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.1523359" y3="0.15750307" z3="2.20153183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99519717" y3="1.45399669" z3="1.30769097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51763213" y3="-0.11872671" z3="2.34862461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87217928" y3="-1.73627002" z3="1.68734861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55279308" y3="-1.52355033" z3="2.87982624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06038647" y3="-4.03026947" z3="0.88251193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51365083" y3="-4.36018286" z3="1.7457166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35559679" y3="-5.68566941" z3="0.8553432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28200917" y3="-2.19634906" z3="-0.17235882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13677271" y3="-3.29221174" z3="-1.03535016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4912139" y3="-4.45082435" z3="-0.62038195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99616695" y3="-4.50859174" z3="0.67693935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1471525" y3="-3.45177959" z3="1.56987585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78332273" y3="-2.29552021" z3="1.13624728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49247451" y3="-3.21937306" z3="-2.06636515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34743753" y3="-5.28985176" z3="-1.30171425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25742807" y3="-5.69676895" z3="1.10598437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74156046" y3="-3.53429777" z3="2.57929463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87894915" y3="-1.44900589" z3="1.81769651">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49271157" y3="4.02182198" z3="0.02508757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86297741" y3="3.80663052" z3="-0.03936683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.3983373" y3="3.27595041" z3="-1.20784889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6052073" y3="2.985439" z3="-2.3150834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23547065" y3="3.19966932" z3="-2.23144984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04978736" y3="4.39364627" z3="0.95217215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51353919" y3="4.02184207" z3="0.80882184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83321659" y3="2.98541604" z3="-1.2645984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06248694" y3="2.58250523" z3="-3.21951099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40024148" y3="2.94767843" z3="-3.08170269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1635746" y3="-5.9098847" z3="2.29375319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7629351" y3="-6.39730376" z3="0.24166284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31354516" y3="2.69679765" z3="-2.33939085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46289175" y3="3.03206255" z3="-0.22439838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63111525" y3="0.16492122" z3="-2.01652109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95458758" y3="1.4117348" z3="-1.87960416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81346639" y3="0.0939682" z3="-2.80388783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29235992" y3="1.20158417" z3="-3.45839874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32933956" y3="-0.86738792" z3="-2.88906716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19937742" y3="1.13477392" z3="-4.06555087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4589781" y3="2.53259579" z3="-2.5970448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59591596" y3="2.43033675" z3="-3.36217861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92709768" y3="3.48456821" z3="-2.54256667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.962156" y3="3.30506883" z3="-3.90701302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57815851" y3="3.90735528" z3="-0.25167288">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75796764" y3="5.05820132" z3="-0.06283442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92633933" y3="3.96286555" z3="0.20176522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44081683" y3="5.10968748" z3="0.75743382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55724851" y3="3.07626338" z3="0.10982257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4796013" y3="5.12626321" z3="1.09932355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32330588" y3="6.23500876" z3="0.50161658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63729029" y3="6.26671941" z3="0.89763027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68480818" y3="7.11475733" z3="0.625701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06062454" y3="7.17550997" z3="1.33433561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35481927" y3="-3.91782602" z3="-2.87503737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53669357" y3="-4.95519662" z3="-2.55476242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22825996" y3="-3.59020374" z3="-3.4699303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48087341" y3="-3.90858714" z3="-3.54549045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69464975" y3="-1.58782672" z3="-2.08481977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43102082" y3="-1.10929829" z3="-2.75588189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52831571" y3="-0.9300375" z3="-1.21733236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74629471" y3="-1.63048803" z3="-2.64387918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9219,-.9544,-.6795;6.6071,-1.95,-1.5426;6.0893,-.9957,-1.406;4.7784,1.4776,-1.0632;4.2901,.3112,-.4996;2.6582,2.7362,-1.1581;4.007,2.7354,-.8489;2.3777,4.9943,-.3865;1.8095,3.8508,-.8967;1.7509,5.87,-.1945;2.0949,1.6093,-1.6828;3.1287,.3579,.2162;1.7164,.3822,-.6439;.6099,.7317,.2817;1.6692,-.859,-1.507;1.0944,-2.4734,-1.3244;2.0116,-5.4903,-6.2785;1.7466,-5.0554,-5.3105;1.0514,-3.9138,-2.8528;1.7142,-3.6749,-5.1636;1.4601,-5.8817,-4.221;1.127,-5.3048,-3.0019;1.3756,-3.0724,-3.9415;1.9447,-3.0079,-5.998;1.5099,-6.9694,-4.3145;.9411,-5.9375,-2.1299;.6509,-3.3656,-1.6075;-.349,-3.8471,-.8607;-.6938,-4.8491,-1.1296;-.3817,-3.5465,.5883;-.4128,-3.0746,3.3478;-.6908,-4.5816,1.4794;-.1072,-2.2709,1.0904;-.1199,-2.0371,2.4612;-.6979,-4.3478,2.8534;-.884,-5.5891,1.0987;.1028,-1.4303,.4279;.1088,-1.0302,2.8211;-.9055,-5.1724,3.5403;-.4121,-2.8946,4.4268;1.3289,-1.7365,-3.9116;1.4666,-1.3316,-3.0096;.3398,3.708,-1.0577;-2.1341,-2.9768,-1.7075;-2.9203,-3.1578,-.5653;-3.1092,-2.2875,.3718;-3.8358,-.7227,.6355;-4.7196,-.26,-.9406;-2.5251,.4582,1.2069;-5.0575,-1.0649,2.011;-3.4066,-4.369,-.3356;-4.1245,-4.6123,.8648;-4.0308,.0271,-1.7504;-5.3745,.6098,-.7509;-5.3532,-1.0895,-1.3035;-1.642,.5614,.5501;-2.1523,.1575,2.2015;-2.9952,1.454,1.3077;-5.5176,-.1187,2.3486;-5.8722,-1.7363,1.6873;-4.5528,-1.5236,2.8798;-5.0604,-4.0303,.8825;-3.5137,-4.3602,1.7457;-4.3556,-5.6857,.8553;4.282,-2.1963,-.1724;4.1368,-3.2922,-1.0354;3.4912,-4.4508,-.6204;2.9962,-4.5086,.6769;3.1472,-3.4518,1.5699;3.7833,-2.2955,1.1362;4.4925,-3.2194,-2.0664;3.3474,-5.2899,-1.3017;2.2574,-5.6968,1.106;2.7416,-3.5343,2.5793;3.8789,-1.449,1.8177;-.4927,4.0218,.0251;-1.863,3.8066,-.0394;-2.3983,3.276,-1.2078;-1.6052,2.9854,-2.3151;-.2355,3.1997,-2.2314;-.0498,4.3936,.9522;-2.5135,4.0218,.8088;-3.8332,2.9854,-1.2646;-2.0625,2.5825,-3.2195;.4002,2.9477,-3.0817;2.1636,-5.9099,2.2938;1.7629,-6.3973,.2417;-4.3135,2.6968,-2.3394;-4.4629,3.0321,-.2244;6.6311,.1649,-2.0165;5.9546,1.4117,-1.8796;7.8135,.094,-2.8039;8.2924,1.2016,-3.4584;8.3293,-.8674,-2.8891;9.1994,1.1348,-4.0656;6.459,2.5326,-2.597;7.5959,2.4303,-3.3622;5.9271,3.4846,-2.5426;7.9622,3.3051,-3.907;4.5782,3.9074,-.2517;3.758,5.0582,-.0628;5.9263,3.9629,.2018;6.4408,5.1097,.7574;6.5572,3.0763,.1098;7.4796,5.1263,1.0993;4.3233,6.235,.5016;5.6373,6.2667,.8976;3.6848,7.1148,.6257;6.0606,7.1755,1.3343;-2.3548,-3.9178,-2.875;-2.5367,-4.9552,-2.5548;-3.2283,-3.5902,-3.4699;-1.4809,-3.9086,-3.5455;-1.6946,-1.5878,-2.0848;-2.431,-1.1093,-2.7559;-1.5283,-.93,-1.2173;-.7463,-1.6305,-2.6439;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930508208</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000478006577 0.000104096439 0.020445336274 0.005240135490</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057137227 -0.000023089 0.000047118 0.000157244 0.000255562 0.000286388 0.000405928 0.000548751 0.000706784 0.000777964 0.000906996 0.001017565 0.001180015 0.001258740 0.001381417 0.001482499 0.001598692 0.001708037 0.001766909 0.002063777 0.002309830 0.002591670 0.002800780 0.003057169 0.003246063 0.003671488 0.003909876 0.004494912 0.004730464 0.004877581 0.005163109 0.005330033 0.005998002 0.006358743 0.006505819 0.006730743 0.006942704 0.007386042 0.008190184 0.008634582 0.008811603 0.009378804 0.009754321 0.009887508 0.010960405 0.011220160 0.011892970 0.012642529 0.013375238 0.013684288 0.013987299 0.014631517 0.014863958 0.015422127 0.015897959 0.016033857 0.016786440 0.018649305 0.019271757 0.019444910 0.020219685 0.020559161 0.021554333 0.021766213 0.022455498 0.022810682 0.023507982 0.023777874 0.024571167 0.025907035 0.026571945 0.027104400 0.027224786 0.027602245 0.028513207 0.028762643 0.029765872 0.031071546 0.031583377 0.034261618 0.034813515 0.036032987 0.039095435 0.039684313 0.042011262 0.045461000 0.046127362 0.046735220 0.048861652 0.049701005 0.050099571 0.050838651 0.051554892 0.052225907 0.052293977 0.052418175 0.053034617 0.053650013 0.055008738 0.056117119 0.056454367 0.056718636 0.057002217 0.057069238 0.057826320 0.058652611 0.059291777 0.059805222 0.061352303 0.062171786 0.062986828 0.064347559 0.064587964 0.065140471 0.066049453 0.067606697 0.067856137 0.069030277 0.070480616 0.071385108 0.072221062 0.072599983 0.073011960 0.073098332 0.078680995 0.080362136 0.081875378 0.082514590 0.083506104 0.084649172 0.089149141 0.089496103 0.089833817 0.091346844 0.093345990 0.094585557 0.095508206 0.096303202 0.096874935 0.098578168 0.100201392 0.100709265 0.102820998 0.104009287 0.104774546 0.106980199 0.109616413 0.111107057 0.112530483 0.112934494 0.114036815 0.114975407 0.117024944 0.117455036 0.118635798 0.119196343 0.120694424 0.122235388 0.125094087 0.125868456 0.128746479 0.129070144 0.131099778 0.133896805 0.137010776 0.137965744 0.138633950 0.139749496 0.140406556 0.143423623 0.144565099 0.145901286 0.146819266 0.152009417 0.153606325 0.154125163 0.159583096 0.160841218 0.168584581 0.171482389 0.176669082 0.179227419 0.181664073 0.184539849 0.189224056 0.190770523 0.191998903 0.201391870 0.202261148 0.206373255 0.206970323 0.207273424 0.212511188 0.212943299 0.215642118 0.217008915 0.220432718 0.220945181 0.224638189 0.225157279 0.227208602 0.231919903 0.234618958 0.236274452 0.238596066 0.246326800 0.248468410 0.252788123 0.256618840 0.257249849 0.258357794 0.262588639 0.271607018 0.282929034 0.292062109 0.300153075 0.300279504 0.301137696 0.307211424 0.307813084 0.309863204 0.320000465 0.321412865 0.326512923 0.330966364 0.336688688 0.347782987 0.352037174 0.355654054 0.360889494 0.362169130 0.364157813 0.384580082 0.407610963 0.414461705 0.430333335 0.431698902 0.435474720 0.451173867 0.464839396 0.475707418 0.479025122 0.480513380 0.486749781 0.498908380 0.503878757 0.515270622 0.518067897 0.544042360 0.566946451 0.567748379 0.586917688 0.591794764 0.606109999 0.644316689 0.645811304 0.668156303 0.675655588 0.687430433 0.703735788 0.704150876 0.704445611 0.711640319 0.717325164 0.734368565 0.738045576 0.739782017 0.747107735 0.750899169 0.771631658 0.775998000 0.809414732 0.821883792 0.824328630 0.828958369 0.834353786 0.848407684 0.849612001 0.851434508 0.854768743 0.863541018 0.867478140 0.876015557 0.887598950 0.891406022 0.892351423 0.893802010 0.902141497 0.910652308 0.918005793 0.922688973 0.924571917 0.932040879 0.936223942 0.956177576 0.962754636 0.965414182 0.970129523 0.977289676 0.982595340 0.998737297 1.013109739 1.016318513 1.021995706 1.040330689 1.055397139 1.071441662 1.073146126 1.080668653 1.087624120 1.108576928 1.110442739 1.118320401 1.119318692 1.122639925 1.124029712 1.141945548 1.150146866 1.161783756 1.170202724 1.177556169 1.189076999 1.200839399 1.222220570 1.234295160 1.258304308 1.296543964 1.299820462 1.314790457 1.326483489 1.327495150 1.330373890 1.331482075 1.334849813 1.342624581 1.349270252 1.369235502 1.380018928 1.381350696 1.381935348 1.429513152 1.512761332 1.558002471 1.684869435 1.922896459</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">308</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92029015" y3="-0.95520179" z3="-0.6824377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60606067" y3="-1.94997967" z3="-1.54546908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08845155" y3="-0.9956739" z3="-1.40783804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77818756" y3="1.47742238" z3="-1.06195927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28855937" y3="0.31022795" z3="-0.50127793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6587678" y3="2.73673724" z3="-1.15928096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00674926" y3="2.73491374" z3="-0.84691627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37714848" y3="4.99295048" z3="-0.38348882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80968817" y3="3.8509618" z3="-0.89780246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74962261" y3="5.86865728" z3="-0.18837413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09647551" y3="1.61067771" z3="-1.6867549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12597839" y3="0.3559967" z3="0.21272596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71500794" y3="0.38299518" z3="-0.649568">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6076492" y3="0.73367401" z3="0.27465874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66732209" y3="-0.85755119" z3="-1.51354905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09317414" y3="-2.47208875" z3="-1.32810998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99995579" y3="-5.49465871" z3="-6.28094396">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73722037" y3="-5.05872832" z3="-5.31283405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04751024" y3="-3.91445389" z3="-2.85487487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70485837" y3="-3.67801362" z3="-5.16746364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45367387" y3="-5.88379077" z3="-4.22163199">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12320344" y3="-5.30557396" z3="-3.00242037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36912419" y3="-3.07421563" z3="-3.94522292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93317342" y3="-3.01195533" z3="-6.0031797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50347248" y3="-6.97163485" z3="-4.3139998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93951433" y3="-5.93737616" z3="-2.12925206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64911002" y3="-3.36434173" z3="-1.60965268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34857829" y3="-3.84591227" z3="-0.85964137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69340897" y3="-4.84832906" z3="-1.12659948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37786722" y3="-3.54347373" z3="0.58898668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40031238" y3="-3.06709044" z3="3.34745124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68057069" y3="-4.57822155" z3="1.48260165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10611638" y3="-2.26573289" z3="1.0879118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11404543" y3="-2.03000515" z3="2.45839885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68312576" y3="-4.34226264" z3="2.8562384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.872714" y3="-5.5861832" z3="1.10383366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09845086" y3="-1.4255447" z3="0.42322209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11297151" y3="-1.02198046" z3="2.81588241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88502572" y3="-5.1666258" z3="3.54548261">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39554006" y3="-2.88577776" z3="4.42625113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32214925" y3="-1.73833197" z3="-3.91667907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46143675" y3="-1.33236282" z3="-3.01534493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.34024738" y3="3.70874527" z3="-1.06204005">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13619547" y3="-2.97848877" z3="-1.70495166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91946816" y3="-3.15728627" z3="-0.56057519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10779683" y3="-2.28420847" z3="0.37416107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83637151" y3="-0.71997559" z3="0.63479216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72175716" y3="-0.26097315" z3="-0.94182133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52637023" y3="0.46334093" z3="1.20303102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05671255" y3="-1.06040311" z3="2.01174643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40319281" y3="-4.36858981" z3="-0.32610818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1166726" y3="-4.60973751" z3="0.87720893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03370083" y3="0.02278966" z3="-1.75345124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37493072" y3="0.6104151" z3="-0.75387145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35733809" y3="-1.0904033" z3="-1.30118859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64432677" y3="0.56603531" z3="0.54502619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15235535" y3="0.16455351" z3="2.19784976">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99759115" y3="1.45871632" z3="1.30280144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51737499" y3="-0.11386591" z3="2.34816545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87115623" y3="-1.73276862" z3="1.68943211">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55132424" y3="-1.5171176" z3="2.88112717">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05350381" y3="-4.02885737" z3="0.89669462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5034002" y3="-4.35576838" z3="1.75545389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34629783" y3="-5.68377046" z3="0.87117312">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28034537" y3="-2.19766343" z3="-0.17670863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13539697" y3="-3.29288199" z3="-1.04046428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49111227" y3="-4.45233316" z3="-0.62590336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99737168" y3="-4.51169031" z3="0.67184987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14764262" y3="-3.45527705" z3="1.56532829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78208" y3="-2.29793606" z3="1.13195977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49067426" y3="-3.21905762" z3="-2.07155259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34770429" y3="-5.2910974" z3="-1.30771344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26111687" y3="-5.70147544" z3="1.10108173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74287737" y3="-3.53894757" z3="2.57497944">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.8768961" y3="-1.45147735" z3="1.81374511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49475504" y3="4.02256416" z3="0.01880215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86485435" y3="3.80708646" z3="-0.04866928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39753484" y3="3.27609641" z3="-1.21836365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60191115" y3="2.98596292" z3="-2.32395111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23233423" y3="3.20049895" z3="-2.23714836">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05398595" y3="4.3941672" z3="0.9470899">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51729012" y3="4.02204687" z3="0.79822104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83195052" y3="2.9839437" z3="-1.27759365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05704424" y3="2.58268764" z3="-3.22932033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40540625" y3="2.94866237" z3="-3.08613059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1700168" y3="-5.91613733" z3="2.28883175">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76574687" y3="-6.40176359" z3="0.23701993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.30971608" y3="2.69308823" z3="-2.35293813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46386587" y3="3.03160008" z3="-0.2388638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63139934" y3="0.16580265" z3="-2.01565192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95549595" y3="1.41275175" z3="-1.87672618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81444241" y3="0.09580647" z3="-2.80211982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29469543" y3="1.20457783" z3="-3.45368554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32975576" y3="-0.8657208" z3="-2.88905387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20219554" y3="1.13847855" z3="-4.06025034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46148505" y3="2.53499298" z3="-2.59087187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59912274" y3="2.43368722" z3="-3.3551325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.93029306" y3="3.48730042" z3="-2.53440723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96659995" y3="3.30947212" z3="-3.89744141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57702056" y3="3.90530232" z3="-0.24598684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75660706" y3="5.05572937" z3="-0.05622493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92393762" y3="3.95925769" z3="0.21112127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43735244" y3="5.10441821" z3="0.77099483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55432083" y3="3.07303919" z3="0.1203731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47505696" y3="5.11985427" z3="1.11592862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32043345" y3="6.23069832" z3="0.51368372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63358486" y3="6.26102893" z3="0.9127854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68130506" y3="7.11029026" z3="0.6409183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05569784" y3="7.16831688" z3="1.35386803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35813103" y3="-3.92365208" z3="-2.86932279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53949219" y3="-4.95992687" z3="-2.54562371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23248391" y3="-3.59811673" z3="-3.46419163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48529059" y3="-3.91664257" z3="-3.54129567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69885126" y3="-1.59006012" z3="-2.08687437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43645989" y3="-1.11460093" z3="-2.75846016">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53237892" y3="-0.92956151" z3="-1.22159853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75025889" y3="-1.63304756" z3="-2.64611439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9203,-.9552,-.6824;6.6061,-1.95,-1.5455;6.0885,-.9957,-1.4078;4.7782,1.4774,-1.062;4.2886,.3102,-.5013;2.6588,2.7367,-1.1593;4.0067,2.7349,-.8469;2.3771,4.993,-.3835;1.8097,3.851,-.8978;1.7496,5.8687,-.1884;2.0965,1.6107,-1.6868;3.126,.356,.2127;1.715,.383,-.6496;.6076,.7337,.2747;1.6673,-.8576,-1.5135;1.0932,-2.4721,-1.3281;2,-5.4947,-6.2809;1.7372,-5.0587,-5.3128;1.0475,-3.9145,-2.8549;1.7049,-3.678,-5.1675;1.4537,-5.8838,-4.2216;1.1232,-5.3056,-3.0024;1.3691,-3.0742,-3.9452;1.9332,-3.012,-6.0032;1.5035,-6.9716,-4.314;.9395,-5.9374,-2.1293;.6491,-3.3643,-1.6097;-.3486,-3.8459,-.8596;-.6934,-4.8483,-1.1266;-.3779,-3.5435,.589;-.4003,-3.0671,3.3475;-.6806,-4.5782,1.4826;-.1061,-2.2657,1.0879;-.114,-2.03,2.4584;-.6831,-4.3423,2.8562;-.8727,-5.5862,1.1038;.0985,-1.4255,.4232;.113,-1.022,2.8159;-.885,-5.1666,3.5455;-.3955,-2.8858,4.4263;1.3221,-1.7383,-3.9167;1.4614,-1.3324,-3.0153;.3402,3.7087,-1.062;-2.1362,-2.9785,-1.705;-2.9195,-3.1573,-.5606;-3.1078,-2.2842,.3742;-3.8364,-.72,.6348;-4.7218,-.261,-.9418;-2.5264,.4633,1.203;-5.0567,-1.0604,2.0117;-3.4032,-4.3686,-.3261;-4.1167,-4.6097,.8772;-4.0337,.0228,-1.7535;-5.3749,.6104,-.7539;-5.3573,-1.0904,-1.3012;-1.6443,.566,.545;-2.1524,.1646,2.1978;-2.9976,1.4587,1.3028;-5.5174,-.1139,2.3482;-5.8712,-1.7328,1.6894;-4.5513,-1.5171,2.8811;-5.0535,-4.0289,.8967;-3.5034,-4.3558,1.7555;-4.3463,-5.6838,.8712;4.2803,-2.1977,-.1767;4.1354,-3.2929,-1.0405;3.4911,-4.4523,-.6259;2.9974,-4.5117,.6718;3.1476,-3.4553,1.5653;3.7821,-2.2979,1.132;4.4907,-3.2191,-2.0716;3.3477,-5.2911,-1.3077;2.2611,-5.7015,1.1011;2.7429,-3.5389,2.575;3.8769,-1.4515,1.8137;-.4948,4.0226,.0188;-1.8649,3.8071,-.0487;-2.3975,3.2761,-1.2184;-1.6019,2.986,-2.324;-.2323,3.2005,-2.2371;-.054,4.3942,.9471;-2.5173,4.022,.7982;-3.832,2.9839,-1.2776;-2.057,2.5827,-3.2293;.4054,2.9487,-3.0861;2.17,-5.9161,2.2888;1.7657,-6.4018,.237;-4.3097,2.6931,-2.3529;-4.4639,3.0316,-.2389;6.6314,.1658,-2.0157;5.9555,1.4128,-1.8767;7.8144,.0958,-2.8021;8.2947,1.2046,-3.4537;8.3298,-.8657,-2.8891;9.2022,1.1385,-4.0603;6.4615,2.535,-2.5909;7.5991,2.4337,-3.3551;5.9303,3.4873,-2.5344;7.9666,3.3095,-3.8974;4.577,3.9053,-.246;3.7566,5.0557,-.0562;5.9239,3.9593,.2111;6.4374,5.1044,.771;6.5543,3.073,.1204;7.4751,5.1199,1.1159;4.3204,6.2307,.5137;5.6336,6.261,.9128;3.6813,7.1103,.6409;6.0557,7.1683,1.3539;-2.3581,-3.9237,-2.8693;-2.5395,-4.9599,-2.5456;-3.2325,-3.5981,-3.4642;-1.4853,-3.9166,-3.5413;-1.6989,-1.5901,-2.0869;-2.4365,-1.1146,-2.7585;-1.5324,-.9296,-1.2216;-.7503,-1.633,-2.6461;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929997439</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000380396429 0.000083520074 0.015401698089 0.004515975133</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057137737 -0.000067918 0.000046113 0.000137594 0.000256447 0.000282497 0.000404883 0.000546317 0.000705267 0.000778278 0.000906884 0.001017234 0.001177614 0.001258789 0.001381317 0.001481817 0.001598817 0.001708162 0.001766813 0.002063772 0.002309893 0.002591235 0.002800395 0.003057487 0.003245039 0.003671738 0.003909949 0.004494465 0.004729506 0.004877050 0.005163272 0.005329970 0.005997561 0.006357011 0.006505389 0.006733709 0.006944512 0.007386767 0.008190163 0.008634151 0.008811406 0.009378920 0.009755198 0.009888183 0.010960649 0.011220385 0.011893741 0.012642410 0.013374367 0.013680836 0.013986558 0.014632217 0.014863524 0.015422522 0.015897555 0.016033950 0.016787103 0.018649100 0.019269079 0.019445422 0.020218461 0.020558135 0.021553923 0.021764815 0.022456136 0.022811099 0.023511988 0.023777363 0.024573150 0.025907064 0.026572230 0.027104388 0.027229162 0.027613337 0.028528863 0.028741933 0.029749329 0.031078043 0.031583311 0.034262455 0.034813542 0.036032839 0.039096256 0.039683960 0.042011521 0.045462842 0.046127035 0.046735655 0.048862326 0.049701028 0.050099624 0.050838616 0.051554923 0.052226340 0.052294143 0.052418375 0.053035147 0.053650198 0.055008956 0.056117075 0.056454268 0.056717894 0.056999132 0.057067406 0.057826858 0.058653475 0.059292420 0.059806910 0.061352131 0.062171839 0.062987505 0.064347964 0.064588954 0.065140697 0.066051190 0.067608406 0.067857282 0.069030413 0.070478823 0.071376300 0.072211114 0.072590569 0.073006055 0.073101755 0.078680891 0.080357805 0.081870885 0.082512474 0.083504617 0.084648682 0.089150492 0.089497764 0.089834570 0.091346872 0.093346365 0.094585651 0.095508388 0.096303194 0.096875103 0.098579383 0.100202020 0.100709318 0.102821200 0.104009668 0.104775082 0.106982365 0.109626623 0.111106884 0.112531461 0.112938272 0.114036689 0.114982474 0.117025051 0.117455035 0.118635643 0.119196383 0.120694438 0.122235382 0.125093834 0.125869501 0.128749374 0.129070089 0.131101023 0.133897001 0.137014054 0.137967448 0.138633857 0.139750986 0.140406037 0.143423632 0.144565207 0.145902285 0.146819516 0.152009480 0.153606339 0.154125823 0.159576342 0.160841367 0.168584739 0.171482626 0.176672760 0.179227913 0.181665399 0.184539898 0.189224563 0.190771332 0.191998171 0.201392127 0.202261269 0.206373169 0.206970454 0.207273496 0.212511253 0.212948282 0.215642205 0.217009084 0.220432313 0.220944938 0.224637680 0.225158371 0.227208627 0.231919895 0.234619743 0.236275272 0.238596718 0.246326412 0.248465521 0.252790247 0.256619797 0.257250070 0.258358072 0.262588731 0.271607405 0.282929118 0.292063071 0.300153721 0.300279614 0.301137886 0.307212112 0.307813297 0.309863209 0.320002193 0.321413044 0.326513308 0.330966277 0.336689098 0.347784331 0.352037842 0.355654100 0.360889300 0.362169823 0.364157918 0.384580191 0.407626544 0.414461444 0.430332802 0.431693005 0.435476634 0.451173938 0.464847501 0.475708360 0.479025852 0.480513595 0.486757837 0.498908368 0.503879212 0.515270896 0.518068502 0.544046483 0.566946509 0.567749451 0.586919310 0.591794246 0.606112403 0.644316937 0.645815559 0.668157139 0.675655917 0.687430496 0.703734212 0.704151562 0.704445949 0.711648470 0.717326955 0.734370040 0.738045655 0.739782358 0.747109098 0.750900912 0.771631978 0.775998384 0.809415514 0.821884409 0.824329953 0.828958369 0.834353930 0.848407816 0.849612845 0.851434629 0.854771154 0.863541638 0.867478154 0.876016030 0.887598987 0.891406776 0.892351821 0.893802131 0.902141590 0.910653195 0.918005569 0.922689628 0.924571958 0.932041384 0.936229268 0.956178931 0.962753355 0.965414154 0.970129812 0.977286328 0.982595367 0.998740019 1.013110059 1.016318780 1.021997122 1.040330982 1.055404012 1.071444487 1.073147243 1.080672547 1.087625148 1.108578148 1.110442797 1.118320566 1.119318910 1.122640007 1.124030384 1.141946117 1.150148984 1.161783808 1.170202984 1.177559135 1.189078320 1.200839571 1.222221198 1.234295368 1.258304848 1.296544764 1.299828454 1.314791460 1.326483477 1.327495285 1.330374880 1.331482252 1.334849991 1.342626699 1.349270999 1.369235715 1.380018949 1.381350666 1.381936310 1.429512897 1.512756248 1.558002417 1.684869577 1.922897193</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">309</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92289069" y3="-0.95516642" z3="-0.68258212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61078827" y3="-1.94804668" z3="-1.54357576">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09226932" y3="-0.99421981" z3="-1.40604668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77919744" y3="1.4775549" z3="-1.06064942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28971311" y3="0.30952806" z3="-0.50165001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65857933" y3="2.73479842" z3="-1.16090952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00602979" y3="2.73416229" z3="-0.84606527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37350303" y3="4.99061807" z3="-0.38487792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80787771" y3="3.8481865" z3="-0.90038221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74538473" y3="5.86563785" z3="-0.19331642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09859877" y3="1.60842909" z3="-1.690419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12574605" y3="0.35357937" z3="0.2102429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71661536" y3="0.37938216" z3="-0.65492408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60697883" y3="0.7283536" z3="0.2672587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67221792" y3="-0.860731" z3="-1.51966179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09437157" y3="-2.47447002" z3="-1.3309189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.98455409" y3="-5.49957084" z3="-6.28579445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.72521064" y3="-5.06291546" z3="-5.31708223">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04382623" y3="-3.91683986" z3="-2.85758784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.69429137" y3="-3.68208769" z3="-5.17233251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.44459846" y3="-5.8872059" z3="-4.22453237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.11829737" y3="-5.3080806" z3="-3.004625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.36278508" y3="-3.07739137" z3="-3.94934808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.92048193" y3="-3.01665221" z3="-6.00913158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49340705" y3="-6.97515008" z3="-4.31642791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93679114" y3="-5.93923169" z3="-2.1305242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64867402" y3="-3.36638521" z3="-1.61140669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34883489" y3="-3.84641389" z3="-0.86052613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69536523" y3="-4.84834015" z3="-1.1274028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37619076" y3="-3.54466674" z3="0.58836608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.39570769" y3="-3.07097475" z3="3.34751469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.67847716" y3="-4.57997957" z3="1.48150074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10299506" y3="-2.26793481" z3="1.08827714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11004458" y3="-2.03317911" z3="2.4589319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.67958885" y3="-4.34527255" z3="2.85531542">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87095326" y3="-5.58813236" z3="1.10236888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10120872" y3="-1.42709858" z3="0.42432859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11728436" y3="-1.02539838" z3="2.81712128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.88148188" y3="-5.17004792" z3="3.54370113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39044143" y3="-2.89017899" z3="4.42636772">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.31694405" y3="-1.7413942" z3="-3.9213497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4597243" y3="-1.3353644" z3="-3.02056962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33888543" y3="3.7054169" z3="-1.06710336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13675961" y3="-2.97601924" z3="-1.70294546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91863462" y3="-3.1539775" z3="-0.55735477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10420324" y3="-2.28086898" z3="0.37787574">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83245598" y3="-0.71634277" z3="0.63807123">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.72106278" y3="-0.26004016" z3="-0.93726532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52190146" y3="0.46799237" z3="1.20264122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05077321" y3="-1.05496172" z3="2.01758152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40400786" y3="-4.36447491" z3="-0.32247805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11606967" y3="-4.60465406" z3="0.88200539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.03479554" y3="0.02037894" z3="-1.75157127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37251795" y3="0.61274057" z3="-0.74975603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35862616" y3="-1.08968576" z3="-1.29262656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63812445" y3="0.56631281" z3="0.54610897">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15054672" y3="0.17387843" z3="2.1997268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99179057" y3="1.46464355" z3="1.2962302">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51042402" y3="-0.10777066" z3="2.35319048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86606602" y3="-1.72752558" z3="1.69801303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.54400275" y3="-1.5105567" z3="2.88672921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05140826" y3="-4.02183297" z3="0.90329301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50060706" y3="-4.35144434" z3="1.75930494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34810536" y3="-5.67782688" z3="0.87583215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28300373" y3="-2.19819919" z3="-0.17812425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13645415" y3="-3.29214371" z3="-1.04325558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49196582" y3="-4.45186878" z3="-0.62949597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99974568" y3="-4.51263055" z3="0.6688034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15157497" y3="-3.45744793" z3="1.56353269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7862553" y3="-2.29996282" z3="1.13096818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49062023" y3="-3.21694989" z3="-2.07463058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34726374" y3="-5.28974104" z3="-1.31222019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26346313" y3="-5.70253868" z3="1.09740548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74792498" y3="-3.54229761" z3="2.5735401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88270019" y3="-1.45464776" z3="1.81381741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49812718" y3="4.02533406" z3="0.01051092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8681481" y3="3.81035539" z3="-0.05851354">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39889026" y3="3.2737187" z3="-1.22642645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60133058" y3="2.97739154" z3="-2.32896594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23184582" y3="3.19147412" z3="-2.24075501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.0590941" y3="4.40165273" z3="0.93768034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.52209349" y3="4.03014632" z3="0.7859239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83340586" y3="2.98239039" z3="-1.28677638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.05492176" y3="2.5697524" z3="-3.23318165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40756494" y3="2.934107" z3="-3.08668428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17304444" y3="-5.91814258" z3="2.28499279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76742716" y3="-6.40195339" z3="0.2330615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31046473" y3="2.69074323" z3="-2.36210499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46601525" y3="3.03133871" z3="-0.24847658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63546923" y3="0.16829028" z3="-2.01174103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95822125" y3="1.41454164" z3="-1.8731087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.82038768" y3="0.10013076" z3="-2.79552072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.30134374" y3="1.21002174" z3="-3.44467816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33673229" y3="-0.86084076" z3="-2.88221089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.21041714" y3="1.14537441" z3="-4.049017">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46490224" y3="2.53789802" z3="-2.58500509">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.60449986" y3="2.43839726" z3="-3.34656523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9327293" y3="3.48962208" z3="-2.52908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.9725756" y3="3.31506425" z3="-3.88704115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57384719" y3="3.90468935" z3="-0.2429276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75207665" y3="5.05439717" z3="-0.05441663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.91984653" y3="3.959533" z3="0.2169991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.4307802" y3="5.10471204" z3="0.77928833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55179806" y3="3.07366663" z3="0.12480593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.46786747" y3="5.12076264" z3="1.12633753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31384538" y3="6.22961233" z3="0.51686501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62575073" y3="6.26068975" z3="0.91971966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67418519" y3="7.10846724" z3="0.64075334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.04625495" y3="7.16812434" z3="1.36191132">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.36214784" y3="-3.91992062" z3="-2.86726917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.54440048" y3="-4.9561521" z3="-2.54372135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23714097" y3="-3.59278433" z3="-3.46027051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.49033779" y3="-3.91360376" z3="-3.5405404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69759195" y3="-1.58838473" z3="-2.08532359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43482476" y3="-1.11202105" z3="-2.75695732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52973439" y3="-0.92762699" z3="-1.2204013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.75012261" y3="-1.63296515" z3="-2.64572699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9229,-.9552,-.6826;6.6108,-1.948,-1.5436;6.0923,-.9942,-1.406;4.7792,1.4776,-1.0606;4.2897,.3095,-.5017;2.6586,2.7348,-1.1609;4.006,2.7342,-.8461;2.3735,4.9906,-.3849;1.8079,3.8482,-.9004;1.7454,5.8656,-.1933;2.0986,1.6084,-1.6904;3.1257,.3536,.2102;1.7166,.3794,-.6549;.607,.7284,.2673;1.6722,-.8607,-1.5197;1.0944,-2.4745,-1.3309;1.9846,-5.4996,-6.2858;1.7252,-5.0629,-5.3171;1.0438,-3.9168,-2.8576;1.6943,-3.6821,-5.1723;1.4446,-5.8872,-4.2245;1.1183,-5.3081,-3.0046;1.3628,-3.0774,-3.9493;1.9205,-3.0167,-6.0091;1.4934,-6.9752,-4.3164;.9368,-5.9392,-2.1305;.6487,-3.3664,-1.6114;-.3488,-3.8464,-.8605;-.6954,-4.8483,-1.1274;-.3762,-3.5447,.5884;-.3957,-3.071,3.3475;-.6785,-4.58,1.4815;-.103,-2.2679,1.0883;-.11,-2.0332,2.4589;-.6796,-4.3453,2.8553;-.871,-5.5881,1.1024;.1012,-1.4271,.4243;.1173,-1.0254,2.8171;-.8815,-5.17,3.5437;-.3904,-2.8902,4.4264;1.3169,-1.7414,-3.9213;1.4597,-1.3354,-3.0206;.3389,3.7054,-1.0671;-2.1368,-2.976,-1.7029;-2.9186,-3.154,-.5574;-3.1042,-2.2809,.3779;-3.8325,-.7163,.6381;-4.7211,-.26,-.9373;-2.5219,.468,1.2026;-5.0508,-1.055,2.0176;-3.404,-4.3645,-.3225;-4.1161,-4.6047,.882;-4.0348,.0204,-1.7516;-5.3725,.6127,-.7498;-5.3586,-1.0897,-1.2926;-1.6381,.5663,.5461;-2.1505,.1739,2.1997;-2.9918,1.4646,1.2962;-5.5104,-.1078,2.3532;-5.8661,-1.7275,1.698;-4.544,-1.5106,2.8867;-5.0514,-4.0218,.9033;-3.5006,-4.3514,1.7593;-4.3481,-5.6778,.8758;4.283,-2.1982,-.1781;4.1365,-3.2921,-1.0433;3.492,-4.4519,-.6295;2.9997,-4.5126,.6688;3.1516,-3.4574,1.5635;3.7863,-2.3,1.131;4.4906,-3.2169,-2.0746;3.3473,-5.2897,-1.3122;2.2635,-5.7025,1.0974;2.7479,-3.5423,2.5735;3.8827,-1.4546,1.8138;-.4981,4.0253,.0105;-1.8681,3.8104,-.0585;-2.3989,3.2737,-1.2264;-1.6013,2.9774,-2.329;-.2318,3.1915,-2.2408;-.0591,4.4017,.9377;-2.5221,4.0301,.7859;-3.8334,2.9824,-1.2868;-2.0549,2.5698,-3.2332;.4076,2.9341,-3.0867;2.173,-5.9181,2.285;1.7674,-6.402,.2331;-4.3105,2.6907,-2.3621;-4.466,3.0313,-.2485;6.6355,.1683,-2.0117;5.9582,1.4145,-1.8731;7.8204,.1001,-2.7955;8.3013,1.21,-3.4447;8.3367,-.8608,-2.8822;9.2104,1.1454,-4.049;6.4649,2.5379,-2.585;7.6045,2.4384,-3.3466;5.9327,3.4896,-2.5291;7.9726,3.3151,-3.887;4.5738,3.9047,-.2429;3.7521,5.0544,-.0544;5.9198,3.9595,.217;6.4308,5.1047,.7793;6.5518,3.0737,.1248;7.4679,5.1208,1.1263;4.3138,6.2296,.5169;5.6258,6.2607,.9197;3.6742,7.1085,.6408;6.0463,7.1681,1.3619;-2.3621,-3.9199,-2.8673;-2.5444,-4.9562,-2.5437;-3.2371,-3.5928,-3.4603;-1.4903,-3.9136,-3.5405;-1.6976,-1.5884,-2.0853;-2.4348,-1.112,-2.757;-1.5297,-.9276,-1.2204;-.7501,-1.633,-2.6457;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928448985</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000420393761 0.000090459366 0.016633091752 0.005276047068</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057138905 -0.000047209 0.000064544 0.000147949 0.000250939 0.000286070 0.000406568 0.000546237 0.000706743 0.000778209 0.000906766 0.001017290 0.001178444 0.001259050 0.001381627 0.001482151 0.001599327 0.001708121 0.001766621 0.002064029 0.002310371 0.002591250 0.002800302 0.003058275 0.003245400 0.003672285 0.003910070 0.004494422 0.004729452 0.004877040 0.005163542 0.005331758 0.005997942 0.006357294 0.006505711 0.006736371 0.006945409 0.007388217 0.008190249 0.008634189 0.008811456 0.009378871 0.009756554 0.009888806 0.010961361 0.011220369 0.011895588 0.012642402 0.013374322 0.013683070 0.013986970 0.014632802 0.014865775 0.015423160 0.015897699 0.016034015 0.016788756 0.018649096 0.019271976 0.019445713 0.020218485 0.020558174 0.021554253 0.021764770 0.022458127 0.022811878 0.023516718 0.023777935 0.024574819 0.025907202 0.026574926 0.027104608 0.027231811 0.027624742 0.028542728 0.028742563 0.029751667 0.031090274 0.031583288 0.034262940 0.034814152 0.036033369 0.039097059 0.039684290 0.042011592 0.045464365 0.046127364 0.046736731 0.048862695 0.049701085 0.050099856 0.050838644 0.051554932 0.052226552 0.052294258 0.052418725 0.053035735 0.053650281 0.055009619 0.056117163 0.056454335 0.056717978 0.056999309 0.057068089 0.057827089 0.058654101 0.059293264 0.059809122 0.061352141 0.062172131 0.062987560 0.064348341 0.064590803 0.065140730 0.066053030 0.067610540 0.067858202 0.069030595 0.070478994 0.071376770 0.072213290 0.072590614 0.073009290 0.073107800 0.078680868 0.080358317 0.081872375 0.082515313 0.083505012 0.084649104 0.089151363 0.089499147 0.089835638 0.091347181 0.093346699 0.094586014 0.095508701 0.096303555 0.096875103 0.098581852 0.100202545 0.100709721 0.102821731 0.104009777 0.104775559 0.106984618 0.109634137 0.111107270 0.112531460 0.112942203 0.114036746 0.114987689 0.117025067 0.117455092 0.118636061 0.119196410 0.120694775 0.122236666 0.125093979 0.125870961 0.128750846 0.129070891 0.131102795 0.133897104 0.137016974 0.137969116 0.138634572 0.139756643 0.140406291 0.143423710 0.144565288 0.145904082 0.146819734 0.152009921 0.153607907 0.154126060 0.159576402 0.160842032 0.168584996 0.171483152 0.176673166 0.179227992 0.181667422 0.184540356 0.189224766 0.190771344 0.191999002 0.201392291 0.202261724 0.206373288 0.206970656 0.207273717 0.212511401 0.212951521 0.215643661 0.217009170 0.220432435 0.220945664 0.224637920 0.225161084 0.227208708 0.231919979 0.234621267 0.236275369 0.238598326 0.246326375 0.248467009 0.252792322 0.256620204 0.257250102 0.258359003 0.262588873 0.271607664 0.282929609 0.292064832 0.300155746 0.300279920 0.301137961 0.307212613 0.307813427 0.309863392 0.320005354 0.321413566 0.326513327 0.330967117 0.336689618 0.347787883 0.352040226 0.355654234 0.360889306 0.362169826 0.364158361 0.384580471 0.407658625 0.414461981 0.430332916 0.431692666 0.435479960 0.451174222 0.464876813 0.475711802 0.479026687 0.480514470 0.486776702 0.498908377 0.503880524 0.515272022 0.518071304 0.544054029 0.566946828 0.567753140 0.586922231 0.591794461 0.606113897 0.644317772 0.645821069 0.668158056 0.675656242 0.687430527 0.703733590 0.704156236 0.704447433 0.711672575 0.717334021 0.734372858 0.738045709 0.739784241 0.747112204 0.750906168 0.771632697 0.775999558 0.809417726 0.821886038 0.824330323 0.828958385 0.834353928 0.848408066 0.849614111 0.851435144 0.854778602 0.863543644 0.867478309 0.876016439 0.887599032 0.891411059 0.892356807 0.893802122 0.902141714 0.910653841 0.918005672 0.922689674 0.924572003 0.932042676 0.936250125 0.956183676 0.962753895 0.965414154 0.970131233 0.977286385 0.982595673 0.998750968 1.013111940 1.016320229 1.022000095 1.040333526 1.055428454 1.071454908 1.073151605 1.080675284 1.087625486 1.108586676 1.110442986 1.118321644 1.119319249 1.122640285 1.124032279 1.141947394 1.150153856 1.161784175 1.170204255 1.177565828 1.189079179 1.200839597 1.222222982 1.234295470 1.258305647 1.296546355 1.299842293 1.314793585 1.326483535 1.327499199 1.330377226 1.331482314 1.334850354 1.342631837 1.349271639 1.369237382 1.380019443 1.381350945 1.381941301 1.429513076 1.512758727 1.558002521 1.684869790 1.922898261</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">310</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92104039" y3="-0.95494812" z3="-0.68234743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60710033" y3="-1.94937345" z3="-1.54519227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08912485" y3="-0.99522854" z3="-1.40785709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77785675" y3="1.47748897" z3="-1.06279174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28887809" y3="0.31031066" z3="-0.50153067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.6578574" y3="2.73618464" z3="-1.15899815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00609838" y3="2.73483409" z3="-0.84761841">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37624522" y3="4.99274762" z3="-0.38383664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80867574" y3="3.85032207" z3="-0.89708185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74892501" y3="5.86823009" z3="-0.19026599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09553917" y3="1.60994329" z3="-1.6861788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12652288" y3="0.35587574" z3="0.21283605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71536298" y3="0.38176484" z3="-0.64906406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60797642" y3="0.73134391" z3="0.2755333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6684449" y3="-0.85872679" z3="-1.51315447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09404943" y3="-2.47346436" z3="-1.32749428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.00055177" y3="-5.49595539" z3="-6.28056779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.73790477" y3="-5.05998616" z3="-5.3124554">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04840171" y3="-3.91562519" z3="-2.85445179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70591716" y3="-3.67927076" z3="-5.16700177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4541054" y3="-5.88502383" z3="-4.2213142">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12376898" y3="-5.30675122" z3="-3.00210827">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37029013" y3="-3.07540899" z3="-3.94474482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93446762" y3="-3.01324134" z3="-6.00266729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.50361682" y3="-6.97288542" z3="-4.31371119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93988283" y3="-5.9385342" z3="-2.12897697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.64999545" y3="-3.36580914" z3="-1.6090856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34823856" y3="-3.84702466" z3="-0.85985763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69330949" y3="-4.84926693" z3="-1.1272964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37834636" y3="-3.5450994" z3="0.58887376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40287194" y3="-3.07048253" z3="3.34771741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68281583" y3="-4.5800359" z3="1.48167686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10556953" y3="-2.26821724" z3="1.0888938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11486523" y3="-2.03312779" z3="2.45946146">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68645994" y3="-4.34489339" z3="2.85540035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87520687" y3="-5.58800323" z3="1.10234992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10053171" y3="-1.42784598" z3="0.42494364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11250522" y3="-1.02541673" z3="2.8177404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89002786" y3="-5.16937194" z3="3.54375096">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.39933841" y3="-2.88953169" z3="4.4265494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32377311" y3="-1.73948495" z3="-3.91622546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46289879" y3="-1.3335369" z3="-3.01484227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33914871" y3="3.70809522" z3="-1.06006521">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13548884" y3="-2.97852588" z3="-1.7054638">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91927286" y3="-3.15702606" z3="-0.56130643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1072427" y3="-2.28408586" z3="0.37356721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8348174" y3="-0.71919654" z3="0.63354124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71726959" y3="-0.25869097" z3="-0.94415182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52455572" y3="0.46232413" z3="1.20465134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05857201" y3="-1.05878294" z3="2.00783867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40404661" y3="-4.36795106" z3="-0.32724859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11835805" y3="-4.60866293" z3="0.87573374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02801659" y3="0.02804806" z3="-1.75366829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37273926" y3="0.61086076" z3="-0.75573907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.35022468" y3="-1.08871615" z3="-1.30666994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.64028544" y3="0.5630467" z3="0.54917776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15412943" y3="0.16378154" z3="2.20081996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99427022" y3="1.45864876" z3="1.30207751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51925498" y3="-0.11176417" z3="2.34266251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87282381" y3="-1.73063756" z3="1.68404558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.55556349" y3="-1.51557187" z3="2.87854109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05453285" y3="-4.02696378" z3="0.89483306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50515987" y3="-4.35476717" z3="1.75427832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.3490164" y3="-5.68223722" z3="0.86936077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28145417" y3="-2.1974156" z3="-0.17612639">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13618998" y3="-3.29280656" z3="-1.03964119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49183772" y3="-4.45215114" z3="-0.62471325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99818806" y3="-4.51110789" z3="0.67309408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14887985" y3="-3.45455456" z3="1.56637385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78362021" y3="-2.2974851" z3="1.13272004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49117065" y3="-3.21915447" z3="-2.07084149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34817439" y3="-5.29104903" z3="-1.30631316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26140022" y3="-5.70043637" z3="1.10252232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74417098" y3="-3.53795201" z3="2.5760727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87897982" y3="-1.45107729" z3="1.81440918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49471159" y3="4.02292304" z3="0.0213979">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86498939" y3="3.80837579" z3="-0.04474853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39907208" y3="3.27738374" z3="-1.21373596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60462348" y3="2.98608937" z3="-2.31984512">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23483161" y3="3.19958124" z3="-2.2344071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05289382" y3="4.39486512" z3="0.94901714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51652892" y3="4.02427151" z3="0.80255699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83387474" y3="2.98692865" z3="-1.27184578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06087095" y3="2.58291637" z3="-3.22470675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.40194259" y3="2.94680935" z3="-3.08371752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1696323" y3="-5.91442675" z3="2.29030466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76629473" y3="-6.40099926" z3="0.23855049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31343174" y3="2.69953433" z3="-2.34725942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46424116" y3="3.03231214" z3="-0.23203859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63155203" y3="0.16626317" z3="-2.0161091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95505928" y3="1.4129445" z3="-1.87774231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81474962" y3="0.09654371" z3="-2.80233656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29461966" y3="1.20530502" z3="-3.45419102">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33055243" y3="-0.86474848" z3="-2.88877184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20231" y3="1.13944597" z3="-4.06046534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.46055739" y3="2.53509806" z3="-2.59235789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59839431" y3="2.43406831" z3="-3.35632928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9288538" y3="3.487113" z3="-2.53653078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96553563" y3="3.30980442" z3="-3.89893291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57635061" y3="3.90559154" z3="-0.24724359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75585394" y3="5.05600383" z3="-0.05751954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92361121" y3="3.96004808" z3="0.20893885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43702467" y3="5.10557406" z3="0.76817207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55449423" y3="3.07373417" z3="0.11691018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47505304" y3="5.12133504" z3="1.112295">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.31996178" y3="6.23146927" z3="0.51097113">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63318587" y3="6.26222657" z3="0.90961104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68105421" y3="7.11093527" z3="0.63657665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05553576" y3="7.16990824" z3="1.34956828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35777527" y3="-3.92296364" z3="-2.87009029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.5394107" y3="-4.95933684" z3="-2.54671778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.23204151" y3="-3.59693087" z3="-3.46473444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.48484472" y3="-3.91585394" z3="-3.54191411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69701383" y3="-1.5904625" z3="-2.08704117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43401199" y3="-1.11447218" z3="-2.75905141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53051887" y3="-0.92999733" z3="-1.2216617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74866279" y3="-1.63405334" z3="-2.64624472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.921,-.9549,-.6823;6.6071,-1.9494,-1.5452;6.0891,-.9952,-1.4079;4.7779,1.4775,-1.0628;4.2889,.3103,-.5015;2.6579,2.7362,-1.159;4.0061,2.7348,-.8476;2.3762,4.9927,-.3838;1.8087,3.8503,-.8971;1.7489,5.8682,-.1903;2.0955,1.6099,-1.6862;3.1265,.3559,.2128;1.7154,.3818,-.6491;.608,.7313,.2755;1.6684,-.8587,-1.5132;1.094,-2.4735,-1.3275;2.0006,-5.496,-6.2806;1.7379,-5.06,-5.3125;1.0484,-3.9156,-2.8545;1.7059,-3.6793,-5.167;1.4541,-5.885,-4.2213;1.1238,-5.3068,-3.0021;1.3703,-3.0754,-3.9447;1.9345,-3.0132,-6.0027;1.5036,-6.9729,-4.3137;.9399,-5.9385,-2.129;.65,-3.3658,-1.6091;-.3482,-3.847,-.8599;-.6933,-4.8493,-1.1273;-.3783,-3.5451,.5889;-.4029,-3.0705,3.3477;-.6828,-4.58,1.4817;-.1056,-2.2682,1.0889;-.1149,-2.0331,2.4595;-.6865,-4.3449,2.8554;-.8752,-5.588,1.1023;.1005,-1.4278,.4249;.1125,-1.0254,2.8177;-.89,-5.1694,3.5438;-.3993,-2.8895,4.4265;1.3238,-1.7395,-3.9162;1.4629,-1.3335,-3.0148;.3391,3.7081,-1.0601;-2.1355,-2.9785,-1.7055;-2.9193,-3.157,-.5613;-3.1072,-2.2841,.3736;-3.8348,-.7192,.6335;-4.7173,-.2587,-.9442;-2.5246,.4623,1.2047;-5.0586,-1.0588,2.0078;-3.404,-4.368,-.3272;-4.1184,-4.6087,.8757;-4.028,.028,-1.7537;-5.3727,.6109,-.7557;-5.3502,-1.0887,-1.3067;-1.6403,.563,.5492;-2.1541,.1638,2.2008;-2.9943,1.4586,1.3021;-5.5193,-.1118,2.3427;-5.8728,-1.7306,1.684;-4.5556,-1.5156,2.8785;-5.0545,-4.027,.8948;-3.5052,-4.3548,1.7543;-4.349,-5.6822,.8694;4.2815,-2.1974,-.1761;4.1362,-3.2928,-1.0396;3.4918,-4.4522,-.6247;2.9982,-4.5111,.6731;3.1489,-3.4546,1.5664;3.7836,-2.2975,1.1327;4.4912,-3.2192,-2.0708;3.3482,-5.291,-1.3063;2.2614,-5.7004,1.1025;2.7442,-3.538,2.5761;3.879,-1.4511,1.8144;-.4947,4.0229,.0214;-1.865,3.8084,-.0447;-2.3991,3.2774,-1.2137;-1.6046,2.9861,-2.3198;-.2348,3.1996,-2.2344;-.0529,4.3949,.949;-2.5165,4.0243,.8026;-3.8339,2.9869,-1.2718;-2.0609,2.5829,-3.2247;.4019,2.9468,-3.0837;2.1696,-5.9144,2.2903;1.7663,-6.401,.2386;-4.3134,2.6995,-2.3473;-4.4642,3.0323,-.232;6.6316,.1663,-2.0161;5.9551,1.4129,-1.8777;7.8147,.0965,-2.8023;8.2946,1.2053,-3.4542;8.3306,-.8647,-2.8888;9.2023,1.1394,-4.0605;6.4606,2.5351,-2.5924;7.5984,2.4341,-3.3563;5.9289,3.4871,-2.5365;7.9655,3.3098,-3.8989;4.5764,3.9056,-.2472;3.7559,5.056,-.0575;5.9236,3.96,.2089;6.437,5.1056,.7682;6.5545,3.0737,.1169;7.4751,5.1213,1.1123;4.32,6.2315,.511;5.6332,6.2622,.9096;3.6811,7.1109,.6366;6.0555,7.1699,1.3496;-2.3578,-3.923,-2.8701;-2.5394,-4.9593,-2.5467;-3.232,-3.5969,-3.4647;-1.4848,-3.9159,-3.5419;-1.697,-1.5905,-2.087;-2.434,-1.1145,-2.7591;-1.5305,-.93,-1.2217;-.7487,-1.6341,-2.6462;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931319432</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000155438999 0.000033160070 0.021177310587 0.005328503301</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.002895026360 0.001930017574</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057139580 -0.000118940 0.000028707 0.000121107 0.000240296 0.000285127 0.000408811 0.000544174 0.000706617 0.000778389 0.000906132 0.001017079 0.001178697 0.001258508 0.001381570 0.001481849 0.001599492 0.001708039 0.001766130 0.002065491 0.002310711 0.002591182 0.002800537 0.003057955 0.003244451 0.003673455 0.003910020 0.004493805 0.004728014 0.004876958 0.005163556 0.005331830 0.005996601 0.006357947 0.006504993 0.006736708 0.006945491 0.007390396 0.008190447 0.008633874 0.008811358 0.009378799 0.009756679 0.009889267 0.010961809 0.011220560 0.011897367 0.012642337 0.013373584 0.013680801 0.013987182 0.014633008 0.014868350 0.015423891 0.015896746 0.016033312 0.016790879 0.018649079 0.019268788 0.019445299 0.020217415 0.020556909 0.021554324 0.021765303 0.022459952 0.022812532 0.023524761 0.023777908 0.024577792 0.025907295 0.026579568 0.027104752 0.027236737 0.027643681 0.028567927 0.028720755 0.029739765 0.031103765 0.031583292 0.034264699 0.034814806 0.036033362 0.039098657 0.039684092 0.042012032 0.045466909 0.046127630 0.046738380 0.048863191 0.049701151 0.050099858 0.050838745 0.051554976 0.052227078 0.052294537 0.052419104 0.053036783 0.053650397 0.055010799 0.056117181 0.056454496 0.056717651 0.056998363 0.057067992 0.057827521 0.058655312 0.059293295 0.059813142 0.061352111 0.062172205 0.062988244 0.064348712 0.064594196 0.065140856 0.066054865 0.067613441 0.067859975 0.069030845 0.070476362 0.071365381 0.072200964 0.072581632 0.073001765 0.073119875 0.078680867 0.080352291 0.081865369 0.082512678 0.083503256 0.084649550 0.089152876 0.089501222 0.089836339 0.091347097 0.093347024 0.094586278 0.095508851 0.096303326 0.096875256 0.098585314 0.100202544 0.100709509 0.102821745 0.104010227 0.104777466 0.106989168 0.109647452 0.111107132 0.112532015 0.112948738 0.114036857 0.114997038 0.117024999 0.117455068 0.118635930 0.119196320 0.120695308 0.122236637 0.125093984 0.125872235 0.128755581 0.129071455 0.131105642 0.133897140 0.137023317 0.137972978 0.138635802 0.139759753 0.140405403 0.143423682 0.144565258 0.145905921 0.146819697 0.152009305 0.153606490 0.154125625 0.159566569 0.160841512 0.168585055 0.171483778 0.176676173 0.179228048 0.181670639 0.184540332 0.189224947 0.190773626 0.192001755 0.201392601 0.202262283 0.206373631 0.206971084 0.207273924 0.212511690 0.212958997 0.215644314 0.217009222 0.220432141 0.220946735 0.224637944 0.225163739 0.227208634 0.231920148 0.234623243 0.236276019 0.238600170 0.246325981 0.248465829 0.252795813 0.256621435 0.257250194 0.258359235 0.262589281 0.271608379 0.282929995 0.292067090 0.300157358 0.300279954 0.301138154 0.307213775 0.307813735 0.309863339 0.320008859 0.321413648 0.326513634 0.330967720 0.336690010 0.347791670 0.352042261 0.355654351 0.360889394 0.362170378 0.364158541 0.384580162 0.407700671 0.414461046 0.430332411 0.431678242 0.435486860 0.451174412 0.464905584 0.475715735 0.479027067 0.480515375 0.486797430 0.498908351 0.503880499 0.515272802 0.518074992 0.544064344 0.566947232 0.567755757 0.586925833 0.591792154 0.606117398 0.644317986 0.645829008 0.668159390 0.675656616 0.687430524 0.703729091 0.704159832 0.704448171 0.711699105 0.717342011 0.734375746 0.738045883 0.739784443 0.747110911 0.750911276 0.771633533 0.776000826 0.809418045 0.821887833 0.824331409 0.828958407 0.834353990 0.848408690 0.849615230 0.851435490 0.854783143 0.863544707 0.867478437 0.876017346 0.887599062 0.891412937 0.892357939 0.893802267 0.902141787 0.910654426 0.918003660 0.922689392 0.924571978 0.932044116 0.936272338 0.956185936 0.962748438 0.965413828 0.970132207 0.977276049 0.982595568 0.998761213 1.013112934 1.016321289 1.022003148 1.040334824 1.055452477 1.071465255 1.073155125 1.080683745 1.087627369 1.108592921 1.110443235 1.118322611 1.119320094 1.122640511 1.124034294 1.141948877 1.150157919 1.161784313 1.170205062 1.177573947 1.189082214 1.200839929 1.222223476 1.234295680 1.258307512 1.296548415 1.299862260 1.314795937 1.326483440 1.327500481 1.330380913 1.331482702 1.334850938 1.342637628 1.349272567 1.369237923 1.380020228 1.381351144 1.381945536 1.429511718 1.512740548 1.558002568 1.684870820 1.922897046</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">311</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92663162" y3="-0.95373566" z3="-0.67914138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.61390423" y3="-1.94687305" z3="-1.54110334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09470437" y3="-0.99324881" z3="-1.40468094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.779505" y3="1.47797027" z3="-1.0628739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29267183" y3="0.31083522" z3="-0.49971372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65727937" y3="2.73311818" z3="-1.15952307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00583562" y3="2.73434367" z3="-0.84934918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37334964" y3="4.99074682" z3="-0.38865868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80673758" y3="3.84642877" z3="-0.89876928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74472296" y3="5.86608634" z3="-0.19455884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09611374" y3="1.6054592" z3="-1.6846909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13047192" y3="0.35553969" z3="0.21503138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71916493" y3="0.37707658" z3="-0.64669298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61079512" y3="0.72449756" z3="0.27755245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67533998" y3="-0.86419099" z3="-1.50980675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09709335" y3="-2.47832024" z3="-1.3249887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="1.99785841" y3="-5.49879117" z3="-6.28089789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.7364368" y3="-5.06295008" z3="-5.31239501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.04952765" y3="-3.91881727" z3="-2.85360459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.70716776" y3="-3.6822556" z3="-5.1660656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.45154901" y3="-5.88813469" z3="-4.2216578">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12256425" y3="-5.30999772" z3="-3.00200119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37298533" y3="-3.07855513" z3="-3.94336368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.93670161" y3="-3.01616447" z3="-6.00141363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.49907667" y3="-6.9760176" z3="-4.31475333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.93774258" y3="-5.94184735" z3="-2.12911023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65118627" y3="-3.36904168" z3="-1.60819888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34951938" y3="-3.84899141" z3="-0.86096251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69701443" y3="-4.84955868" z3="-1.13138975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38121516" y3="-3.55100054" z3="0.58850788">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4143683" y3="-3.08339276" z3="3.34841657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69359959" y3="-4.5869983" z3="1.47736469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10456537" y3="-2.27632224" z3="1.0928405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11806115" y3="-2.04507164" z3="2.4641395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70149428" y3="-4.35547748" z3="2.85168506">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88967367" y3="-5.5925222" z3="1.09426523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10786126" y3="-1.43499877" z3="0.43200075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.11222169" y3="-1.03945323" z3="2.82628326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91120517" y3="-5.18093637" z3="3.53734779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41400219" y3="-2.90557867" z3="4.42783136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.32906201" y3="-1.74259116" z3="-3.91379213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46896564" y3="-1.3378015" z3="-3.01203303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33707271" y3="3.70276919" z3="-1.05942099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13225179" y3="-2.97287492" z3="-1.70626036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91879079" y3="-3.15320209" z3="-0.56429958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10556545" y3="-2.28309342" z3="0.37351546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83035612" y3="-0.71764138" z3="0.63706519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71362058" y3="-0.25481792" z3="-0.93975151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51863267" y3="0.46222575" z3="1.20855236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.05281457" y3="-1.05775638" z3="2.01223932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40810593" y3="-4.36335061" z3="-0.33600787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12702918" y3="-4.60584722" z3="0.86375367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.0246294" y3="0.0328545" z3="-1.74929718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36921788" y3="0.61442859" z3="-0.75017619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34683775" y3="-1.08432404" z3="-1.30320908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63247474" y3="0.559677" z3="0.55511171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15143617" y3="0.16515231" z3="2.20643149">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98658709" y3="1.4596805" z3="1.3027611">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.51256783" y3="-0.11074377" z3="2.34851615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.86784725" y3="-1.72894295" z3="1.68889255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5488865" y3="-1.51546056" z3="2.88199596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06187052" y3="-4.02173134" z3="0.88136452">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51636988" y3="-4.35677548" z3="1.74515253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36037167" y3="-5.67912921" z3="0.85345326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.2873499" y3="-2.19619522" z3="-0.17254099">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14001014" y3="-3.29084776" z3="-1.03659139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49299586" y3="-4.44882888" z3="-0.62236298">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99920349" y3="-4.50736167" z3="0.67542089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15270577" y3="-3.45191025" z3="1.5694569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7898877" y3="-2.29601923" z3="1.13643804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49502401" y3="-3.21733079" z3="-2.06780938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34720573" y3="-5.28688937" z3="-1.30453885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25956077" y3="-5.69525443" z3="1.10421847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74814681" y3="-3.53511469" z3="2.57920831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88706822" y3="-1.45015321" z3="1.81858292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49583761" y3="4.02327256" z3="0.02116063">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86642758" y3="3.81026299" z3="-0.04334271">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40185562" y3="3.27532011" z3="-1.20996446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60829889" y3="2.9776264" z3="-2.31499419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23807246" y3="3.1890804" z3="-2.23091285">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.05315359" y3="4.39908173" z3="0.94684378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51727012" y3="4.03079529" z3="0.80335318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83725176" y3="2.98804145" z3="-1.266479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06558321" y3="2.57125224" z3="-3.21790156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3980569" y3="2.9313357" z3="-3.07934384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16560675" y3="-5.90858794" z3="2.29198989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7647292" y3="-6.39541096" z3="0.23980119">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31873186" y3="2.70242808" z3="-2.34158207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46626671" y3="3.0344128" z3="-0.22590724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63526771" y3="0.16832931" z3="-2.01451732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95661862" y3="1.41407958" z3="-1.87805754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81855475" y3="0.0994343" z3="-2.80075166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29634176" y3="1.20792942" z3="-3.45457405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.33614147" y3="-0.86105045" z3="-2.88560064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.20414426" y3="1.14268481" z3="-4.06080181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45988959" y3="2.53585332" z3="-2.59482423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59780064" y3="2.43555997" z3="-3.35883656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92643357" y3="3.48701141" z3="-2.54051386">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96319156" y3="3.31099375" z3="-3.90309013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57510778" y3="3.90706815" z3="-0.25200066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75322616" y3="5.05673235" z3="-0.0641281">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92253059" y3="3.96439613" z3="0.20314549">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.43497729" y3="5.1119778" z3="0.75885965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55407523" y3="3.07896108" z3="0.11445843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.47306819" y3="5.12999625" z3="1.10235919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3160059" y3="6.23428636" z3="0.50142387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.62971711" y3="6.26783095" z3="0.89831708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.67559688" y3="7.11328569" z3="0.62727768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.05107843" y3="7.17707382" z3="1.33606173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35549194" y3="-3.91261085" z3="-2.87477437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53998978" y3="-4.94975149" z3="-2.55563106">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22830911" y3="-3.58227017" z3="-3.4692932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4818766" y3="-3.90513673" z3="-3.54574185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68975439" y3="-1.58435682" z3="-2.0822305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42539515" y3="-1.10359948" z3="-2.75221245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52103267" y3="-0.92787147" z3="-1.21439269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74137482" y3="-1.62873824" z3="-2.64163044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9266,-.9537,-.6791;6.6139,-1.9469,-1.5411;6.0947,-.9932,-1.4047;4.7795,1.478,-1.0629;4.2927,.3108,-.4997;2.6573,2.7331,-1.1595;4.0058,2.7343,-.8493;2.3733,4.9907,-.3887;1.8067,3.8464,-.8988;1.7447,5.8661,-.1946;2.0961,1.6055,-1.6847;3.1305,.3555,.215;1.7192,.3771,-.6467;.6108,.7245,.2776;1.6753,-.8642,-1.5098;1.0971,-2.4783,-1.325;1.9979,-5.4988,-6.2809;1.7364,-5.063,-5.3124;1.0495,-3.9188,-2.8536;1.7072,-3.6823,-5.1661;1.4515,-5.8881,-4.2217;1.1226,-5.31,-3.002;1.373,-3.0786,-3.9434;1.9367,-3.0162,-6.0014;1.4991,-6.976,-4.3148;.9377,-5.9418,-2.1291;.6512,-3.369,-1.6082;-.3495,-3.849,-.861;-.697,-4.8496,-1.1314;-.3812,-3.551,.5885;-.4144,-3.0834,3.3484;-.6936,-4.587,1.4774;-.1046,-2.2763,1.0928;-.1181,-2.0451,2.4641;-.7015,-4.3555,2.8517;-.8897,-5.5925,1.0943;.1079,-1.435,.432;.1122,-1.0395,2.8263;-.9112,-5.1809,3.5373;-.414,-2.9056,4.4278;1.3291,-1.7426,-3.9138;1.469,-1.3378,-3.012;.3371,3.7028,-1.0594;-2.1323,-2.9729,-1.7063;-2.9188,-3.1532,-.5643;-3.1056,-2.2831,.3735;-3.8304,-.7176,.6371;-4.7136,-.2548,-.9398;-2.5186,.4622,1.2086;-5.0528,-1.0578,2.0122;-3.4081,-4.3634,-.336;-4.127,-4.6058,.8638;-4.0246,.0329,-1.7493;-5.3692,.6144,-.7502;-5.3468,-1.0843,-1.3032;-1.6325,.5597,.5551;-2.1514,.1652,2.2064;-2.9866,1.4597,1.3028;-5.5126,-.1107,2.3485;-5.8678,-1.7289,1.6889;-4.5489,-1.5155,2.882;-5.0619,-4.0217,.8814;-3.5164,-4.3568,1.7452;-4.3604,-5.6791,.8535;4.2873,-2.1962,-.1725;4.14,-3.2908,-1.0366;3.493,-4.4488,-.6224;2.9992,-4.5074,.6754;3.1527,-3.4519,1.5695;3.7899,-2.296,1.1364;4.495,-3.2173,-2.0678;3.3472,-5.2869,-1.3045;2.2596,-5.6953,1.1042;2.7481,-3.5351,2.5792;3.8871,-1.4502,1.8186;-.4958,4.0233,.0212;-1.8664,3.8103,-.0433;-2.4019,3.2753,-1.21;-1.6083,2.9776,-2.315;-.2381,3.1891,-2.2309;-.0532,4.3991,.9468;-2.5173,4.0308,.8034;-3.8373,2.988,-1.2665;-2.0656,2.5713,-3.2179;.3981,2.9313,-3.0793;2.1656,-5.9086,2.292;1.7647,-6.3954,.2398;-4.3187,2.7024,-2.3416;-4.4663,3.0344,-.2259;6.6353,.1683,-2.0145;5.9566,1.4141,-1.8781;7.8186,.0994,-2.8008;8.2963,1.2079,-3.4546;8.3361,-.8611,-2.8856;9.2041,1.1427,-4.0608;6.4599,2.5359,-2.5948;7.5978,2.4356,-3.3588;5.9264,3.487,-2.5405;7.9632,3.311,-3.9031;4.5751,3.9071,-.252;3.7532,5.0567,-.0641;5.9225,3.9644,.2031;6.435,5.112,.7589;6.5541,3.079,.1145;7.4731,5.13,1.1024;4.316,6.2343,.5014;5.6297,6.2678,.8983;3.6756,7.1133,.6273;6.0511,7.1771,1.3361;-2.3555,-3.9126,-2.8748;-2.54,-4.9498,-2.5556;-3.2283,-3.5823,-3.4693;-1.4819,-3.9051,-3.5457;-1.6898,-1.5844,-2.0822;-2.4254,-1.1036,-2.7522;-1.521,-.9279,-1.2144;-.7414,-1.6287,-2.6416;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929012035</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000540005454 0.000110310351 0.019631471078 0.005281317718</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057141418 -0.000085408 0.000057689 0.000083084 0.000255287 0.000290442 0.000409060 0.000544654 0.000706629 0.000778404 0.000906337 0.001017079 0.001179216 0.001258462 0.001381465 0.001481783 0.001599758 0.001708321 0.001766277 0.002065861 0.002311243 0.002591951 0.002800872 0.003057936 0.003244347 0.003673849 0.003910042 0.004494168 0.004727574 0.004877179 0.005163777 0.005334898 0.005996506 0.006358029 0.006504883 0.006740362 0.006948671 0.007391436 0.008190451 0.008634051 0.008811797 0.009379105 0.009758857 0.009890471 0.010961945 0.011220637 0.011898321 0.012642573 0.013373740 0.013683227 0.013987746 0.014633244 0.014870847 0.015425255 0.015896656 0.016033201 0.016792724 0.018649547 0.019270212 0.019445378 0.020217356 0.020556830 0.021554659 0.021765639 0.022461904 0.022813386 0.023532687 0.023777953 0.024580810 0.025907498 0.026580857 0.027104726 0.027241114 0.027658623 0.028593346 0.028721117 0.029740890 0.031118991 0.031583457 0.034266521 0.034815336 0.036033770 0.039099724 0.039684121 0.042012482 0.045469836 0.046128230 0.046738882 0.048864446 0.049701304 0.050100078 0.050838817 0.051554984 0.052227212 0.052294728 0.052419606 0.053037405 0.053650663 0.055011345 0.056117222 0.056454645 0.056718320 0.056998331 0.057067870 0.057827772 0.058655821 0.059293695 0.059817173 0.061352115 0.062172213 0.062988727 0.064349315 0.064597441 0.065141037 0.066058218 0.067616050 0.067861874 0.069031142 0.070476513 0.071366242 0.072203960 0.072581777 0.073004316 0.073134464 0.078680859 0.080352688 0.081866093 0.082518497 0.083503523 0.084650126 0.089154722 0.089503424 0.089837949 0.091347338 0.093347532 0.094586901 0.095509138 0.096303777 0.096875592 0.098588979 0.100203579 0.100709721 0.102822450 0.104010728 0.104780534 0.106992784 0.109657999 0.111107507 0.112532091 0.112955369 0.114037152 0.115006321 0.117025001 0.117455170 0.118636709 0.119196336 0.120695961 0.122237689 0.125094479 0.125874606 0.128759513 0.129072333 0.131108172 0.133897171 0.137029310 0.137976147 0.138636684 0.139766370 0.140405455 0.143424497 0.144565327 0.145908216 0.146820151 0.152009773 0.153607884 0.154126450 0.159566451 0.160841630 0.168585388 0.171484532 0.176678384 0.179228024 0.181674317 0.184540654 0.189225725 0.190773896 0.192004219 0.201392802 0.202262573 0.206374413 0.206971573 0.207274198 0.212511910 0.212964984 0.215646182 0.217009275 0.220432734 0.220947253 0.224639034 0.225168045 0.227208742 0.231920275 0.234625769 0.236276489 0.238602498 0.246326017 0.248468061 0.252798621 0.256622397 0.257250266 0.258360265 0.262589505 0.271608929 0.282930519 0.292069127 0.300159986 0.300280029 0.301138365 0.307215112 0.307813980 0.309863481 0.320012621 0.321414136 0.326513704 0.330969588 0.336690615 0.347796701 0.352045103 0.355654484 0.360890195 0.362170550 0.364159046 0.384580274 0.407754120 0.414465305 0.430333013 0.431679318 0.435495322 0.451174555 0.464948497 0.475719826 0.479027457 0.480516505 0.486826652 0.498908372 0.503884098 0.515273883 0.518079655 0.544075441 0.566947839 0.567760469 0.586929931 0.591792251 0.606120164 0.644318534 0.645838702 0.668160964 0.675657512 0.687430624 0.703729759 0.704165032 0.704449151 0.711733506 0.717352136 0.734379466 0.738045931 0.739785289 0.747111121 0.750919019 0.771634795 0.776002599 0.809419326 0.821890503 0.824331945 0.828958454 0.834354004 0.848409127 0.849617875 0.851436433 0.854792754 0.863547445 0.867478688 0.876018637 0.887599102 0.891414251 0.892369158 0.893802347 0.902141788 0.910654828 0.918004005 0.922689857 0.924571968 0.932046023 0.936300907 0.956200066 0.962749197 0.965413851 0.970133785 0.977276749 0.982595648 0.998776579 1.013113278 1.016323245 1.022008566 1.040337632 1.055489410 1.071480466 1.073161010 1.080691598 1.087628690 1.108607819 1.110443677 1.118323835 1.119320502 1.122641008 1.124037838 1.141950650 1.150163208 1.161784619 1.170206599 1.177584486 1.189085285 1.200840033 1.222224785 1.234295802 1.258308874 1.296551328 1.299883526 1.314798668 1.326483538 1.327503525 1.330388174 1.331484388 1.334851243 1.342646018 1.349276325 1.369240657 1.380021367 1.381351189 1.381952329 1.429511854 1.512740711 1.558002763 1.684871602 1.922902808</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">312</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92158673" y3="-0.95429865" z3="-0.67945466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60651335" y3="-1.95017346" z3="-1.54287883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08874652" y3="-0.99578986" z3="-1.40640894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77795004" y3="1.47754759" z3="-1.06390253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28990459" y3="0.31138605" z3="-0.49964172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65783436" y3="2.73642984" z3="-1.15770313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00684096" y3="2.7354091" z3="-0.84959813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37852199" y3="4.9947206" z3="-0.38682503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80956622" y3="3.85124587" z3="-0.89605941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75153366" y3="5.87081388" z3="-0.19228308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09376236" y3="1.60956323" z3="-1.68145065">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12897773" y3="0.35835334" z3="0.21694617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71599813" y3="0.38262597" z3="-0.64205052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61021596" y3="0.73234751" z3="0.28436609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66786358" y3="-0.8586833" z3="-1.50494802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09433054" y3="-2.4735236" z3="-1.32336572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01526865" y3="-5.48979417" z3="-6.27720813">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74959531" y3="-5.055106" z3="-5.30934182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05262891" y3="-3.91395706" z3="-2.85194299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71696523" y3="-3.67457605" z3="-5.16224569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46258372" y3="-5.88156192" z3="-4.22010811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12853893" y3="-5.30489251" z3="-3.00112847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37757444" y3="-3.07232664" z3="-3.94024734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94793845" y3="-3.00744396" z3="-5.99637195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51251056" y3="-6.96929272" z3="-4.31377465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94218393" y3="-5.93779213" z3="-2.12931012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6510365" y3="-3.36547185" z3="-1.60707343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.3488171" y3="-3.84769198" z3="-0.86035339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69323708" y3="-4.84964098" z3="-1.12964485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38201055" y3="-3.54736525" z3="0.58861514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41464318" y3="-3.0748629" z3="3.34770418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69173878" y3="-4.58239032" z3="1.47949846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10797139" y3="-2.27130733" z3="1.09056332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12100476" y3="-2.03752083" z3="2.46137287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69951299" y3="-4.34833351" z3="2.85340141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88544583" y3="-5.58925308" z3="1.09846635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10251447" y3="-1.43097554" z3="0.42793522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10779985" y3="-1.0307878" z3="2.82132882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90718795" y3="-5.17294021" z3="3.54058314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41404768" y3="-2.89502617" z3="4.4267625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33070822" y3="-1.73647395" z3="-3.91014401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4673322" y3="-1.3315966" z3="-3.0078765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33958855" y3="3.70861763" z3="-1.05516577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13365683" y3="-2.97798813" z3="-1.70809406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.92032786" y3="-3.15875256" z3="-0.56626318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11002309" y3="-2.28790835" z3="0.37020951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83628936" y3="-0.72303314" z3="0.63332118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.71693281" y3="-0.25858055" z3="-0.94437388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52575611" y3="0.45664537" z3="1.20786562">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06098489" y3="-1.06511431" z3="2.00604449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40631866" y3="-4.36994752" z3="-0.33634174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1246822" y3="-4.61289316" z3="0.86371497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.02654796" y3="0.03134278" z3="-1.75189839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.37361665" y3="0.60977376" z3="-0.75451315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.34856737" y3="-1.08806969" z3="-1.31060275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6415439" y3="0.55919558" z3="0.55261826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.15524546" y3="0.1552027" z3="2.20319035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99544345" y3="1.45270059" z3="1.30823455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52188529" y3="-0.1187815" z3="2.34264738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.87502205" y3="-1.73631039" z3="1.68024169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.558473" y3="-1.52372468" z3="2.87612802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06111805" y3="-4.03138482" z3="0.88054095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51471724" y3="-4.36079804" z3="1.74482655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35504079" y3="-5.68671356" z3="0.85474073">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28187801" y3="-2.19613099" z3="-0.1718228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13693827" y3="-3.29230416" z3="-1.03440538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49132684" y3="-4.45072663" z3="-0.61916458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99601975" y3="-4.50809352" z3="0.67806307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14676692" y3="-3.45098749" z3="1.5706355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7828488" y3="-2.29478418" z3="1.13669904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49294224" y3="-3.21992334" z3="-2.06535166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.34783346" y3="-5.29007655" z3="-1.30021291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25740198" y3="-5.69634072" z3="1.10747737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74094569" y3="-3.53318915" z3="2.57997726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87800371" y3="-1.44785267" z3="1.81777403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49152984" y3="4.02133357" z3="0.02899671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8619867" y3="3.80675906" z3="-0.03412942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.39892581" y3="3.27799272" z3="-1.20286821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.60716005" y3="2.98853598" z3="-2.31139287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.23714148" y3="3.20184149" z3="-2.22884399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04734725" y3="4.39177458" z3="0.95611019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51145552" y3="4.02108767" z3="0.81520009">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83396927" y3="2.9882822" z3="-1.25842416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.06567985" y3="2.58707819" z3="-3.21587007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.39745117" y3="2.95096717" z3="-3.08043665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16331971" y3="-5.90899386" z3="2.29534619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76328779" y3="-6.39741985" z3="0.2433522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.31575796" y3="2.70263983" z3="-2.33339795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46238026" y3="3.03270202" z3="-0.21739896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.63020453" y3="0.16455876" z3="-2.01765677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95368766" y3="1.41140422" z3="-1.88089262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81216571" y3="0.09329921" z3="-2.80564515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.29064636" y3="1.20063172" z3="-3.46092417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32805682" y3="-0.86807732" z3="-2.89069539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19735722" y3="1.13358114" z3="-4.0685654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45763219" y3="2.53196629" z3="-2.59910642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59417035" y3="2.42940858" z3="-3.36484318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.9257654" y3="3.48398789" z3="-2.54457908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.96007156" y3="3.30392768" z3="-3.91023867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57889215" y3="3.90753299" z3="-0.25360837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75912266" y3="5.05857651" z3="-0.06464141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92728803" y3="3.96295308" z3="0.19898145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44260525" y3="5.1099866" z3="0.75326297">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55742235" y3="3.07639624" z3="0.1089619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48146978" y3="5.12651444" z3="1.09462701">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32493469" y3="6.23548592" z3="0.49921609">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63943863" y3="6.26718605" z3="0.89366024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68631212" y3="7.11552707" z3="0.62526577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06315099" y3="7.17603776" z3="1.32994621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35339023" y3="-3.92003204" z3="-2.8753139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53530167" y3="-4.95718131" z3="-2.55470785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22659381" y3="-3.59301361" z3="-3.47103893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47919323" y3="-3.91116607" z3="-3.54550308">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69464383" y3="-1.58890001" z3="-2.08572924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43104503" y3="-1.11099567" z3="-2.75695862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52872528" y3="-0.93089166" z3="-1.21844622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74557273" y3="-1.63127998" z3="-2.64405164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9216,-.9543,-.6795;6.6065,-1.9502,-1.5429;6.0887,-.9958,-1.4064;4.778,1.4775,-1.0639;4.2899,.3114,-.4996;2.6578,2.7364,-1.1577;4.0068,2.7354,-.8496;2.3785,4.9947,-.3868;1.8096,3.8512,-.8961;1.7515,5.8708,-.1923;2.0938,1.6096,-1.6815;3.129,.3584,.2169;1.716,.3826,-.6421;.6102,.7323,.2844;1.6679,-.8587,-1.5049;1.0943,-2.4735,-1.3234;2.0153,-5.4898,-6.2772;1.7496,-5.0551,-5.3093;1.0526,-3.914,-2.8519;1.717,-3.6746,-5.1622;1.4626,-5.8816,-4.2201;1.1285,-5.3049,-3.0011;1.3776,-3.0723,-3.9402;1.9479,-3.0074,-5.9964;1.5125,-6.9693,-4.3138;.9422,-5.9378,-2.1293;.651,-3.3655,-1.6071;-.3488,-3.8477,-.8604;-.6932,-4.8496,-1.1296;-.382,-3.5474,.5886;-.4146,-3.0749,3.3477;-.6917,-4.5824,1.4795;-.108,-2.2713,1.0906;-.121,-2.0375,2.4614;-.6995,-4.3483,2.8534;-.8854,-5.5893,1.0985;.1025,-1.431,.4279;.1078,-1.0308,2.8213;-.9072,-5.1729,3.5406;-.414,-2.895,4.4268;1.3307,-1.7365,-3.9101;1.4673,-1.3316,-3.0079;.3396,3.7086,-1.0552;-2.1337,-2.978,-1.7081;-2.9203,-3.1588,-.5663;-3.11,-2.2879,.3702;-3.8363,-.723,.6333;-4.7169,-.2586,-.9444;-2.5258,.4566,1.2079;-5.061,-1.0651,2.006;-3.4063,-4.3699,-.3363;-4.1247,-4.6129,.8637;-4.0265,.0313,-1.7519;-5.3736,.6098,-.7545;-5.3486,-1.0881,-1.3106;-1.6415,.5592,.5526;-2.1552,.1552,2.2032;-2.9954,1.4527,1.3082;-5.5219,-.1188,2.3426;-5.875,-1.7363,1.6802;-4.5585,-1.5237,2.8761;-5.0611,-4.0314,.8805;-3.5147,-4.3608,1.7448;-4.355,-5.6867,.8547;4.2819,-2.1961,-.1718;4.1369,-3.2923,-1.0344;3.4913,-4.4507,-.6192;2.996,-4.5081,.6781;3.1468,-3.451,1.5706;3.7828,-2.2948,1.1367;4.4929,-3.2199,-2.0654;3.3478,-5.2901,-1.3002;2.2574,-5.6963,1.1075;2.7409,-3.5332,2.58;3.878,-1.4479,1.8178;-.4915,4.0213,.029;-1.862,3.8068,-.0341;-2.3989,3.278,-1.2029;-1.6072,2.9885,-2.3114;-.2371,3.2018,-2.2288;-.0473,4.3918,.9561;-2.5115,4.0211,.8152;-3.834,2.9883,-1.2584;-2.0657,2.5871,-3.2159;.3975,2.951,-3.0804;2.1633,-5.909,2.2953;1.7633,-6.3974,.2434;-4.3158,2.7026,-2.3334;-4.4624,3.0327,-.2174;6.6302,.1646,-2.0177;5.9537,1.4114,-1.8809;7.8122,.0933,-2.8056;8.2906,1.2006,-3.4609;8.3281,-.8681,-2.8907;9.1974,1.1336,-4.0686;6.4576,2.532,-2.5991;7.5942,2.4294,-3.3648;5.9258,3.484,-2.5446;7.9601,3.3039,-3.9102;4.5789,3.9075,-.2536;3.7591,5.0586,-.0646;5.9273,3.963,.199;6.4426,5.11,.7533;6.5574,3.0764,.109;7.4815,5.1265,1.0946;4.3249,6.2355,.4992;5.6394,6.2672,.8937;3.6863,7.1155,.6253;6.0632,7.176,1.3299;-2.3534,-3.92,-2.8753;-2.5353,-4.9572,-2.5547;-3.2266,-3.593,-3.471;-1.4792,-3.9112,-3.5455;-1.6946,-1.5889,-2.0857;-2.431,-1.111,-2.757;-1.5287,-.9309,-1.2184;-.7456,-1.6313,-2.6441;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931488792</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000285229543 0.000061737026 0.023279560616 0.005340369917</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001577676687 0.001051784458</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057143827 -0.000360715 0.000065788 0.000116974 0.000240175 0.000285768 0.000408842 0.000544279 0.000706766 0.000778337 0.000905380 0.001014425 0.001176745 0.001258324 0.001381040 0.001479964 0.001599844 0.001707512 0.001765928 0.002065880 0.002311635 0.002590421 0.002800727 0.003058891 0.003242439 0.003673203 0.003910137 0.004494639 0.004723424 0.004875364 0.005163243 0.005338415 0.005995198 0.006357516 0.006504460 0.006738079 0.006952902 0.007392317 0.008190354 0.008630219 0.008811281 0.009379780 0.009760453 0.009891573 0.010962201 0.011220649 0.011899873 0.012642367 0.013373129 0.013686559 0.013986726 0.014633552 0.014874928 0.015426334 0.015895478 0.016030628 0.016796029 0.018649000 0.019271670 0.019445361 0.020217333 0.020556897 0.021554073 0.021765186 0.022464077 0.022813732 0.023543022 0.023777251 0.024584000 0.025907889 0.026579460 0.027104345 0.027246874 0.027677325 0.028630684 0.028712088 0.029735317 0.031144041 0.031583374 0.034268927 0.034816690 0.036034125 0.039100884 0.039685151 0.042012356 0.045473909 0.046126585 0.046739017 0.048865692 0.049701270 0.050100286 0.050838724 0.051555048 0.052228231 0.052295168 0.052420316 0.053039037 0.053651184 0.055013704 0.056117292 0.056454651 0.056717484 0.056995496 0.057066971 0.057828636 0.058656877 0.059295718 0.059821834 0.061352238 0.062172337 0.062989316 0.064350311 0.064602336 0.065141507 0.066062968 0.067618320 0.067865169 0.069031519 0.070472060 0.071358323 0.072201986 0.072576998 0.073002927 0.073153069 0.078682104 0.080349646 0.081863544 0.082515214 0.083503004 0.084646597 0.089158344 0.089507857 0.089841484 0.091347639 0.093348557 0.094587240 0.095509674 0.096304509 0.096875963 0.098593081 0.100204688 0.100709593 0.102823763 0.104011373 0.104783867 0.106997995 0.109682246 0.111108476 0.112535357 0.112963312 0.114037309 0.115022624 0.117025160 0.117455000 0.118637353 0.119196349 0.120696725 0.122238754 0.125095519 0.125877395 0.128763698 0.129074920 0.131112383 0.133897662 0.137037623 0.137979861 0.138635324 0.139779635 0.140404808 0.143424588 0.144564525 0.145910534 0.146820290 0.152009589 0.153605926 0.154128000 0.159560751 0.160841097 0.168586532 0.171485089 0.176684668 0.179229665 0.181677184 0.184540742 0.189227540 0.190778943 0.192003174 0.201393423 0.202262602 0.206375814 0.206971819 0.207274508 0.212512375 0.212979656 0.215648874 0.217009403 0.220431712 0.220947849 0.224639732 0.225172902 0.227209513 0.231920395 0.234628367 0.236279064 0.238605083 0.246325901 0.248469441 0.252803729 0.256624442 0.257250649 0.258361527 0.262589702 0.271609510 0.282930601 0.292071902 0.300163467 0.300281520 0.301138988 0.307216947 0.307814572 0.309863901 0.320017627 0.321415395 0.326514477 0.330970809 0.336691744 0.347802327 0.352048387 0.355654607 0.360891702 0.362171377 0.364159792 0.384580097 0.407805121 0.414465891 0.430333952 0.431674021 0.435497242 0.451175157 0.464990068 0.475719046 0.479030791 0.480518340 0.486863293 0.498908387 0.503888137 0.515274122 0.518081124 0.544085249 0.566948335 0.567765449 0.586935611 0.591791383 0.606125483 0.644320514 0.645848215 0.668163463 0.675658090 0.687430908 0.703725738 0.704167258 0.704450106 0.711772188 0.717361336 0.734382708 0.738046092 0.739787207 0.747109251 0.750926670 0.771636048 0.776004347 0.809424699 0.821892912 0.824333853 0.828958472 0.834354554 0.848410404 0.849620364 0.851437999 0.854806855 0.863551504 0.867478940 0.876019989 0.887599286 0.891421979 0.892374075 0.893803299 0.902141853 0.910659803 0.918003451 0.922688615 0.924571990 0.932047759 0.936327022 0.956207839 0.962745628 0.965414231 0.970135620 0.977271671 0.982595816 0.998790447 1.013119142 1.016325568 1.022014007 1.040341515 1.055522522 1.071494380 1.073166750 1.080706798 1.087631920 1.108621430 1.110444022 1.118324941 1.119321427 1.122641501 1.124041101 1.141952958 1.150169456 1.161785160 1.170208111 1.177594908 1.189089773 1.200840695 1.222227414 1.234296659 1.258310167 1.296554627 1.299904267 1.314801855 1.326483552 1.327505447 1.330392680 1.331485036 1.334851602 1.342650789 1.349283538 1.369245905 1.380021868 1.381351209 1.381958676 1.429511695 1.512737550 1.558002890 1.684872090 1.922908320</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">313</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92202301" y3="-0.95394752" z3="-0.68239357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60724" y3="-1.94838042" z3="-1.54691812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08864993" y3="-0.9944791" z3="-1.41022822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77595265" y3="1.4777655" z3="-1.06682756">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28934779" y3="0.31118626" z3="-0.50228045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65480625" y3="2.73564838" z3="-1.15662116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00435211" y3="2.73508614" z3="-0.85060828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37575713" y3="4.99313944" z3="-0.38253206">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80646826" y3="3.84986328" z3="-0.89200889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74913865" y3="5.86838432" z3="-0.18881408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09063264" y3="1.60905254" z3="-1.6811647">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12894451" y3="0.35721254" z3="0.21518802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71547389" y3="0.38029606" z3="-0.64286914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60994554" y3="0.72772174" z3="0.28473687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66832931" y3="-0.86048505" z3="-1.50652314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09662719" y3="-2.47701602" z3="-1.32249433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0129342" y3="-5.49893622" z3="-6.27451833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.74860218" y3="-5.06306343" z3="-5.30682498">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05458355" y3="-3.91888896" z3="-2.8499742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71768952" y3="-3.68239278" z3="-5.16090745">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46154413" y3="-5.88822514" z3="-4.21662687">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.12903345" y3="-5.31003131" z3="-2.99800663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.3798672" y3="-3.07857238" z3="-3.93918726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94878874" y3="-3.01630046" z3="-5.99582052">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.5102049" y3="-6.9761045" z3="-4.30926487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94263878" y3="-5.9419339" z3="-2.12550467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65360093" y3="-3.36954399" z3="-1.60522218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34673562" y3="-3.85067622" z3="-0.85903699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69167063" y3="-4.85252183" z3="-1.12822226">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38118529" y3="-3.54989586" z3="0.58979407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4153507" y3="-3.07866447" z3="3.34916821">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69168969" y3="-4.58514568" z3="1.48029166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10674131" y3="-2.27458062" z3="1.09243725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1212138" y3="-2.04091121" z3="2.46318492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.700233" y3="-4.35164576" z3="2.85418787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.88477852" y3="-5.59255867" z3="1.09918092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10438734" y3="-1.43401684" z3="0.4302299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.1069101" y3="-1.03399848" z3="2.82353029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90886993" y3="-5.17634412" z3="3.54059883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41608763" y3="-2.89869259" z3="4.4281324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33490037" y3="-1.74263048" z3="-3.91050618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47029754" y3="-1.33666447" z3="-3.00856351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33623396" y3="3.70817182" z3="-1.04881133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13184155" y3="-2.98033166" z3="-1.70884368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91890277" y3="-3.15828866" z3="-0.56683169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10838242" y3="-2.28544907" z3="0.36779137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8325985" y3="-0.71854235" z3="0.62585744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70216332" y3="-0.25037977" z3="-0.95682021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5219039" y3="0.45595344" z3="1.21002407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0694425" y3="-1.05686814" z3="1.98903737">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40599602" y3="-4.36864028" z3="-0.33455456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12474965" y3="-4.60860113" z3="0.86600964">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00721118" y3="0.04866709" z3="-1.75704851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36631122" y3="0.61224975" z3="-0.76681586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32528781" y3="-1.08177147" z3="-1.33325378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63145166" y3="0.55345671" z3="0.56206536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16175575" y3="0.15422566" z3="2.20897991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98768976" y3="1.45444396" z3="1.3045929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53057345" y3="-0.10883854" z3="2.32020805">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88265036" y3="-1.72617281" z3="1.65738545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57563209" y3="-1.5157646" z3="2.86391901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05993112" y3="-4.02543191" z3="0.88206309">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5139851" y3="-4.3552667" z3="1.74666074">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35715794" y3="-5.68154102" z3="0.85844326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28376877" y3="-2.19600686" z3="-0.17348861">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13854753" y3="-3.29287751" z3="-1.03513444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49395535" y3="-4.45153372" z3="-0.61836379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99953602" y3="-4.50805862" z3="0.67924109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15073314" y3="-3.45019318" z3="1.5709317">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78624697" y3="-2.29415028" z3="1.13563585">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49348294" y3="-3.22095035" z3="-2.06646369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35036542" y3="-5.29163312" z3="-1.29857612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26099404" y3="-5.69583189" z3="1.10993416">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74575072" y3="-3.53178404" z3="2.5806556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88216721" y3="-1.44698475" z3="1.81614999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49233106" y3="4.02141228" z3="0.03719606">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86334733" y3="3.81014884" z3="-0.0237685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40359206" y3="3.28439952" z3="-1.19221852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61443165" y3="2.99415051" z3="-2.30234583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24373817" y3="3.20376523" z3="-2.22200014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04571624" y3="4.39015296" z3="0.96377415">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51080933" y3="4.02518644" z3="0.82684999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83966672" y3="2.99949839" z3="-1.24605786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07555877" y3="2.59530344" z3="-3.20667289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38868035" y3="2.95225301" z3="-3.0748116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16702389" y3="-5.90719631" z3="2.2979785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76675233" y3="-6.39771752" z3="0.24655553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32567322" y3="2.72503148" z3="-2.32199622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46451382" y3="3.0360679" z3="-0.20249212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62866595" y3="0.166374" z3="-2.021839">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.95117252" y3="1.41263633" z3="-1.88460956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.81037147" y3="0.09632634" z3="-2.81025641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28773085" y3="1.20426814" z3="-3.46534189">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32707764" y3="-0.86456828" z3="-2.89569163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19431668" y3="1.1381648" z3="-4.07321395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45392025" y3="2.53381737" z3="-2.60268109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59030198" y3="2.4324456" z3="-3.36873558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92126869" y3="3.4853399" z3="-2.54780544">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95535281" y3="3.30743409" z3="-3.91395332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57655216" y3="3.90675522" z3="-0.25363094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75664794" y3="5.05732147" z3="-0.062176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92568818" y3="3.96221684" z3="0.19707104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44109902" y3="5.10879652" z3="0.7523896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55677204" y3="3.07561739" z3="0.10270355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48072407" y3="5.12524577" z3="1.0919262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32298399" y3="6.23394817" z3="0.50156165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63772676" y3="6.26569816" z3="0.89487329">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68470105" y3="7.11329864" z3="0.6266331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06192706" y3="7.17434112" z3="1.33093624">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35197007" y3="-3.92391116" z3="-2.8743496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53502728" y3="-4.96032093" z3="-2.55180228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22458282" y3="-3.59711839" z3="-3.47099926">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47732018" y3="-3.91714138" z3="-3.54388006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69078014" y3="-1.59274448" z3="-2.0887488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42601497" y3="-1.11540659" z3="-2.76187406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5249833" y3="-0.93285806" z3="-1.2226276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74201695" y3="-1.63715001" z3="-2.64667842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.922,-.9539,-.6824;6.6072,-1.9484,-1.5469;6.0886,-.9945,-1.4102;4.776,1.4778,-1.0668;4.2893,.3112,-.5023;2.6548,2.7356,-1.1566;4.0044,2.7351,-.8506;2.3758,4.9931,-.3825;1.8065,3.8499,-.892;1.7491,5.8684,-.1888;2.0906,1.6091,-1.6812;3.1289,.3572,.2152;1.7155,.3803,-.6429;.6099,.7277,.2847;1.6683,-.8605,-1.5065;1.0966,-2.477,-1.3225;2.0129,-5.4989,-6.2745;1.7486,-5.0631,-5.3068;1.0546,-3.9189,-2.85;1.7177,-3.6824,-5.1609;1.4615,-5.8882,-4.2166;1.129,-5.31,-2.998;1.3799,-3.0786,-3.9392;1.9488,-3.0163,-5.9958;1.5102,-6.9761,-4.3093;.9426,-5.9419,-2.1255;.6536,-3.3695,-1.6052;-.3467,-3.8507,-.859;-.6917,-4.8525,-1.1282;-.3812,-3.5499,.5898;-.4154,-3.0787,3.3492;-.6917,-4.5851,1.4803;-.1067,-2.2746,1.0924;-.1212,-2.0409,2.4632;-.7002,-4.3516,2.8542;-.8848,-5.5926,1.0992;.1044,-1.434,.4302;.1069,-1.034,2.8235;-.9089,-5.1763,3.5406;-.4161,-2.8987,4.4281;1.3349,-1.7426,-3.9105;1.4703,-1.3367,-3.0086;.3362,3.7082,-1.0488;-2.1318,-2.9803,-1.7088;-2.9189,-3.1583,-.5668;-3.1084,-2.2854,.3678;-3.8326,-.7185,.6259;-4.7022,-.2504,-.9568;-2.5219,.456,1.21;-5.0694,-1.0569,1.989;-3.406,-4.3686,-.3346;-4.1247,-4.6086,.866;-4.0072,.0487,-1.757;-5.3663,.6122,-.7668;-5.3253,-1.0818,-1.3333;-1.6315,.5535,.5621;-2.1618,.1542,2.209;-2.9877,1.4544,1.3046;-5.5306,-.1088,2.3202;-5.8827,-1.7262,1.6574;-4.5756,-1.5158,2.8639;-5.0599,-4.0254,.8821;-3.514,-4.3553,1.7467;-4.3572,-5.6815,.8584;4.2838,-2.196,-.1735;4.1385,-3.2929,-1.0351;3.494,-4.4515,-.6184;2.9995,-4.5081,.6792;3.1507,-3.4502,1.5709;3.7862,-2.2942,1.1356;4.4935,-3.221,-2.0665;3.3504,-5.2916,-1.2986;2.261,-5.6958,1.1099;2.7458,-3.5318,2.5807;3.8822,-1.447,1.8161;-.4923,4.0214,.0372;-1.8633,3.8101,-.0238;-2.4036,3.2844,-1.1922;-1.6144,2.9942,-2.3023;-.2437,3.2038,-2.222;-.0457,4.3902,.9638;-2.5108,4.0252,.8268;-3.8397,2.9995,-1.2461;-2.0756,2.5953,-3.2067;.3887,2.9523,-3.0748;2.167,-5.9072,2.298;1.7668,-6.3977,.2466;-4.3257,2.725,-2.322;-4.4645,3.0361,-.2025;6.6287,.1664,-2.0218;5.9512,1.4126,-1.8846;7.8104,.0963,-2.8103;8.2877,1.2043,-3.4653;8.3271,-.8646,-2.8957;9.1943,1.1382,-4.0732;6.4539,2.5338,-2.6027;7.5903,2.4324,-3.3687;5.9213,3.4853,-2.5478;7.9554,3.3074,-3.914;4.5766,3.9068,-.2536;3.7566,5.0573,-.0622;5.9257,3.9622,.1971;6.4411,5.1088,.7524;6.5568,3.0756,.1027;7.4807,5.1252,1.0919;4.323,6.2339,.5016;5.6377,6.2657,.8949;3.6847,7.1133,.6266;6.0619,7.1743,1.3309;-2.352,-3.9239,-2.8743;-2.535,-4.9603,-2.5518;-3.2246,-3.5971,-3.471;-1.4773,-3.9171,-3.5439;-1.6908,-1.5927,-2.0887;-2.426,-1.1154,-2.7619;-1.525,-.9329,-1.2226;-.742,-1.6372,-2.6467;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929618422</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000752763212 0.000155717580 0.018893033765 0.005302527199</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057139349 -0.000146204 0.000035785 0.000115972 0.000220698 0.000277497 0.000408081 0.000532099 0.000705699 0.000778012 0.000911509 0.001012364 0.001176422 0.001259678 0.001379634 0.001479058 0.001591290 0.001705014 0.001765595 0.002060332 0.002316772 0.002590390 0.002799703 0.003055422 0.003236642 0.003672947 0.003906436 0.004488592 0.004718065 0.004864882 0.005159029 0.005315229 0.005994594 0.006352047 0.006502166 0.006732686 0.006948887 0.007389594 0.008188932 0.008625883 0.008809981 0.009376680 0.009757036 0.009893738 0.010962737 0.011219843 0.011899162 0.012641174 0.013353871 0.013655775 0.013984849 0.014635544 0.014865390 0.015426222 0.015879765 0.016008227 0.016804574 0.018650178 0.019260920 0.019445518 0.020211804 0.020547156 0.021549255 0.021762175 0.022459810 0.022814986 0.023547930 0.023776390 0.024586323 0.025907729 0.026550139 0.027100192 0.027205837 0.027696942 0.028523670 0.028673477 0.029685835 0.031186408 0.031583200 0.034267963 0.034820966 0.036034489 0.039100464 0.039688075 0.042012385 0.045474102 0.046119831 0.046714805 0.048866442 0.049701681 0.050097942 0.050838785 0.051555072 0.052228203 0.052295342 0.052420830 0.053039040 0.053651514 0.055013394 0.056116717 0.056453347 0.056705635 0.056955232 0.057056315 0.057827561 0.058657430 0.059295948 0.059825986 0.061350012 0.062173250 0.062988137 0.064351228 0.064607595 0.065141624 0.066063596 0.067621873 0.067853445 0.069032506 0.070429183 0.071210115 0.072127125 0.072545598 0.072957632 0.073168814 0.078671241 0.080295797 0.081805867 0.082514221 0.083489534 0.084644136 0.089159857 0.089508561 0.089837035 0.091347955 0.093347841 0.094588188 0.095510210 0.096302138 0.096876055 0.098596365 0.100194289 0.100709620 0.102823727 0.104009035 0.104786862 0.106999709 0.109673373 0.111109980 0.112537854 0.112968895 0.114037426 0.115012920 0.117024812 0.117455215 0.118634437 0.119196620 0.120696063 0.122237025 0.125095053 0.125879659 0.128762497 0.129077151 0.131116878 0.133897265 0.137039549 0.137974895 0.138635118 0.139780846 0.140403391 0.143423405 0.144553809 0.145915806 0.146820714 0.152006879 0.153603900 0.154107003 0.159443783 0.160838472 0.168582817 0.171485512 0.176690325 0.179232595 0.181678723 0.184540930 0.189224536 0.190785009 0.192004832 0.201394095 0.202262166 0.206375368 0.206972280 0.207275134 0.212512044 0.212983274 0.215648862 0.217000471 0.220424810 0.220942030 0.224634577 0.225175783 0.227209788 0.231920506 0.234629523 0.236280122 0.238606980 0.246325348 0.248456594 0.252808702 0.256622973 0.257250593 0.258361810 0.262589696 0.271609801 0.282931173 0.292072616 0.300165353 0.300283594 0.301139518 0.307217325 0.307814691 0.309864209 0.320024420 0.321417667 0.326514712 0.330967717 0.336691791 0.347804072 0.352048512 0.355654540 0.360885479 0.362171564 0.364159751 0.384579768 0.407834450 0.414439111 0.430328144 0.431566324 0.435499270 0.451175596 0.465012115 0.475719128 0.479033925 0.480519705 0.486839422 0.498908286 0.503880519 0.515269750 0.518078033 0.544091762 0.566947239 0.567769074 0.586936458 0.591774992 0.606122137 0.644316211 0.645853928 0.668163942 0.675658926 0.687431114 0.703650813 0.704161482 0.704446689 0.711775078 0.717364248 0.734381825 0.738046151 0.739789392 0.747018763 0.750928968 0.771636196 0.776005167 0.809428915 0.821894335 0.824335643 0.828958512 0.834355170 0.848410975 0.849619641 0.851437879 0.854805846 0.863551016 0.867479217 0.876019782 0.887599632 0.891424846 0.892365222 0.893805028 0.902142142 0.910663008 0.917991556 0.922686475 0.924571870 0.932047806 0.936333975 0.956185886 0.962686053 0.965413157 0.970133810 0.977178637 0.982595242 0.998794682 1.013120391 1.016325585 1.022014419 1.040345133 1.055530781 1.071499321 1.073167852 1.080716803 1.087634321 1.108626857 1.110444170 1.118325485 1.119321976 1.122641662 1.124042066 1.141953841 1.150171938 1.161785489 1.170208279 1.177596944 1.189091791 1.200841507 1.222228095 1.234296769 1.258311042 1.296555767 1.299916739 1.314802254 1.326483323 1.327503108 1.330392079 1.331486016 1.334851827 1.342652980 1.349286999 1.369252915 1.380022451 1.381351428 1.381960533 1.429503761 1.512596839 1.558002890 1.684872239 1.922838064</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">314</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92479505" y3="-0.95309534" z3="-0.68200268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60952374" y3="-1.94676598" z3="-1.54838204">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.09018436" y3="-0.99324716" z3="-1.41185996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77543992" y3="1.47799038" z3="-1.0693596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.29106939" y3="0.31162692" z3="-0.50252732">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65295736" y3="2.7338357" z3="-1.15651333">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00309391" y3="2.73468647" z3="-0.85308286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37358014" y3="4.99118695" z3="-0.38295011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80420715" y3="3.84726256" z3="-0.89077996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7458946" y3="5.8663733" z3="-0.18477228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08870597" y3="1.60656671" z3="-1.67933928">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.13154921" y3="0.35747787" z3="0.21644239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71722091" y3="0.37736747" z3="-0.64034975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.61170622" y3="0.72284615" z3="0.28800471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.67194719" y3="-0.86395404" z3="-1.5032994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09959768" y3="-2.48064386" z3="-1.31971895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02161345" y3="-5.50617676" z3="-6.26873242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75598115" y3="-5.06942808" z3="-5.30179299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05857532" y3="-3.9229121" z3="-2.84705553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72690891" y3="-3.68861874" z3="-5.15661962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46547604" y3="-5.89361797" z3="-4.21178698">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13132666" y3="-5.31427439" z3="-2.99414974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38747742" y3="-3.08365101" z3="-3.93594322">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96071538" y3="-3.02331938" z3="-5.99140006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51272444" y3="-6.98161009" z3="-4.30378547">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94240734" y3="-5.94538646" z3="-2.12162249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65567931" y3="-3.37213337" z3="-1.60358303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34704182" y3="-3.85220535" z3="-0.85924411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69398664" y3="-4.85251132" z3="-1.13113777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38365997" y3="-3.55469613" z3="0.59005383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42600814" y3="-3.0886607" z3="3.35005942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.70127336" y3="-4.59065686" z3="1.4771473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10629675" y3="-2.28086583" z3="1.09613869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1242659" y3="-2.0504939" z3="2.46756977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71380153" y3="-4.35991077" z3="2.85153185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89798289" y3="-5.59546562" z3="1.09266355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.11060853" y3="-1.43977423" z3="0.43654196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10667213" y3="-1.04561018" z3="2.83119959">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92776296" y3="-5.18528478" z3="3.53597494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42922302" y3="-2.91154848" z3="4.42958262">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34461242" y3="-1.74767908" z3="-3.90791075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47775615" y3="-1.34143162" z3="-3.00575306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33353952" y3="3.70501984" z3="-1.04423305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12782364" y3="-2.97553852" z3="-1.71090894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91794715" y3="-3.15458993" z3="-0.57129683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10726214" y3="-2.28366774" z3="0.36523738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.8294039" y3="-0.71638168" z3="0.6255232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.6951541" y3="-0.24393888" z3="-0.95838216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51815254" y3="0.45523188" z3="1.21423502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.06840568" y3="-1.05547423" z3="1.98587071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40895864" y3="-4.36423971" z3="-0.34370725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13210455" y3="-4.60534189" z3="0.85379112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99825662" y3="0.05996753" z3="-1.75511978">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36197058" y3="0.61635809" z3="-0.76726691">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31536946" y3="-1.07500392" z3="-1.34027289">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62638493" y3="0.55198393" z3="0.56832968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16090217" y3="0.15151959" z3="2.21376797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98268367" y3="1.45405153" z3="1.30953454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.52874957" y3="-0.10741122" z3="2.31833181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88201652" y3="-1.72308223" z3="1.65166731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.57653539" y3="-1.5165983" z3="2.86067658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06597959" y3="-4.01958283" z3="0.86853994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5237456" y3="-4.35751424" z3="1.73708249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36732837" y3="-5.67826179" z3="0.84283623">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28773979" y3="-2.19494615" z3="-0.17103553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14172415" y3="-3.29269382" z3="-1.03142451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49541322" y3="-4.44978422" z3="-0.61364801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00056694" y3="-4.5042871" z3="0.68388001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.15341935" y3="-3.44599213" z3="1.57467364">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.79036537" y3="-2.29123089" z3="1.13832493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4968089" y3="-3.22240298" z3="-2.06285462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35054365" y3="-5.2900395" z3="-1.29319499">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2601718" y3="-5.69066499" z3="1.11574114">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.7482829" y3="-3.52609101" z3="2.58444677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88680802" y3="-1.44319451" z3="1.81791986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49298561" y3="4.01857825" z3="0.04326997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86444301" y3="3.80940964" z3="-0.01576176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40722663" y3="3.28576241" z3="-1.18410653">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61998191" y3="2.99451972" z3="-2.29537459">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24866924" y3="3.2013854" z3="-2.21648787">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04445069" y3="4.38625601" z3="0.96939828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51040034" y3="4.02496841" z3="0.83597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84394642" y3="3.00444619" z3="-1.23643104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08308404" y3="2.59723306" z3="-3.19938589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38210928" y3="2.94974384" z3="-3.07081024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16465462" y3="-5.89994476" z3="2.30410996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76637697" y3="-6.39364373" z3="0.25299846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33229117" y3="2.7350626" z3="-2.3126186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.4670644" y3="3.03893647" z3="-0.19181001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62772604" y3="0.16740837" z3="-2.02612525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.9491359" y3="1.41311317" z3="-1.88929473">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80783111" y3="0.09761227" z3="-2.81702012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28238174" y3="1.20509922" z3="-3.47492526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32553019" y3="-0.86276125" z3="-2.90213742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1877105" y3="1.13915006" z3="-4.08472351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44891936" y3="2.53378028" z3="-2.61021693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58368452" y3="2.43257111" z3="-3.37872968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91520124" y3="3.4847391" z3="-2.55544563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94643078" y3="3.3071073" z3="-3.92620515">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57578591" y3="3.90713669" z3="-0.25838163">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75518729" y3="5.05691124" z3="-0.06576669">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92550595" y3="3.96401968" z3="0.19001012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44109098" y3="5.11135407" z3="0.74339891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55625596" y3="3.07852889" z3="0.09871121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48080219" y3="5.12900042" z3="1.08182723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32108983" y3="6.23417243" z3="0.49732889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63688786" y3="6.26736028" z3="0.88733912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68141036" y3="7.11330749" z3="0.62731253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06067274" y3="7.17636774" z3="1.32332586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34760686" y3="-3.91598504" z3="-2.87944807">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53386509" y3="-4.95276527" z3="-2.56018331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21814955" y3="-3.58559284" z3="-3.47717851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47172797" y3="-3.9093741" z3="-3.54751995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68306278" y3="-1.58758622" z3="-2.08621784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.4169488" y3="-1.10604674" z3="-2.75742368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51510761" y3="-0.93135591" z3="-1.21802095">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73365918" y3="-1.63308835" z3="-2.64380974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9248,-.9531,-.682;6.6095,-1.9468,-1.5484;6.0902,-.9932,-1.4119;4.7754,1.478,-1.0694;4.2911,.3116,-.5025;2.653,2.7338,-1.1565;4.0031,2.7347,-.8531;2.3736,4.9912,-.383;1.8042,3.8473,-.8908;1.7459,5.8664,-.1848;2.0887,1.6066,-1.6793;3.1315,.3575,.2164;1.7172,.3774,-.6403;.6117,.7228,.288;1.6719,-.864,-1.5033;1.0996,-2.4806,-1.3197;2.0216,-5.5062,-6.2687;1.756,-5.0694,-5.3018;1.0586,-3.9229,-2.8471;1.7269,-3.6886,-5.1566;1.4655,-5.8936,-4.2118;1.1313,-5.3143,-2.9941;1.3875,-3.0837,-3.9359;1.9607,-3.0233,-5.9914;1.5127,-6.9816,-4.3038;.9424,-5.9454,-2.1216;.6557,-3.3721,-1.6036;-.347,-3.8522,-.8592;-.694,-4.8525,-1.1311;-.3837,-3.5547,.5901;-.426,-3.0887,3.3501;-.7013,-4.5907,1.4771;-.1063,-2.2809,1.0961;-.1243,-2.0505,2.4676;-.7138,-4.3599,2.8515;-.898,-5.5955,1.0927;.1106,-1.4398,.4365;.1067,-1.0456,2.8312;-.9278,-5.1853,3.536;-.4292,-2.9115,4.4296;1.3446,-1.7477,-3.9079;1.4778,-1.3414,-3.0058;.3335,3.705,-1.0442;-2.1278,-2.9755,-1.7109;-2.9179,-3.1546,-.5713;-3.1073,-2.2837,.3652;-3.8294,-.7164,.6255;-4.6952,-.2439,-.9584;-2.5182,.4552,1.2142;-5.0684,-1.0555,1.9859;-3.409,-4.3642,-.3437;-4.1321,-4.6053,.8538;-3.9983,.06,-1.7551;-5.362,.6164,-.7673;-5.3154,-1.075,-1.3403;-1.6264,.552,.5683;-2.1609,.1515,2.2138;-2.9827,1.4541,1.3095;-5.5287,-.1074,2.3183;-5.882,-1.7231,1.6517;-4.5765,-1.5166,2.8607;-5.066,-4.0196,.8685;-3.5237,-4.3575,1.7371;-4.3673,-5.6783,.8428;4.2877,-2.1949,-.171;4.1417,-3.2927,-1.0314;3.4954,-4.4498,-.6136;3.0006,-4.5043,.6839;3.1534,-3.446,1.5747;3.7904,-2.2912,1.1383;4.4968,-3.2224,-2.0629;3.3505,-5.29,-1.2932;2.2602,-5.6907,1.1157;2.7483,-3.5261,2.5844;3.8868,-1.4432,1.8179;-.493,4.0186,.0433;-1.8644,3.8094,-.0158;-2.4072,3.2858,-1.1841;-1.62,2.9945,-2.2954;-.2487,3.2014,-2.2165;-.0445,4.3863,.9694;-2.5104,4.025,.836;-3.8439,3.0044,-1.2364;-2.0831,2.5972,-3.1994;.3821,2.9497,-3.0708;2.1647,-5.8999,2.3041;1.7664,-6.3936,.253;-4.3323,2.7351,-2.3126;-4.4671,3.0389,-.1918;6.6277,.1674,-2.0261;5.9491,1.4131,-1.8893;7.8078,.0976,-2.817;8.2824,1.2051,-3.4749;8.3255,-.8628,-2.9021;9.1877,1.1392,-4.0847;6.4489,2.5338,-2.6102;7.5837,2.4326,-3.3787;5.9152,3.4847,-2.5554;7.9464,3.3071,-3.9262;4.5758,3.9071,-.2584;3.7552,5.0569,-.0658;5.9255,3.964,.19;6.4411,5.1114,.7434;6.5563,3.0785,.0987;7.4808,5.129,1.0818;4.3211,6.2342,.4973;5.6369,6.2674,.8873;3.6814,7.1133,.6273;6.0607,7.1764,1.3233;-2.3476,-3.916,-2.8794;-2.5339,-4.9528,-2.5602;-3.2181,-3.5856,-3.4772;-1.4717,-3.9094,-3.5475;-1.6831,-1.5876,-2.0862;-2.4169,-1.106,-2.7574;-1.5151,-.9314,-1.218;-.7337,-1.6331,-2.6438;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662928183840</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000669750991 0.000139637539 0.020406298281 0.005426222573</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057140712 -0.000125012 0.000056651 0.000088706 0.000219453 0.000325390 0.000404731 0.000527037 0.000704403 0.000777870 0.000912108 0.001012366 0.001180021 0.001260222 0.001378303 0.001479738 0.001586791 0.001705265 0.001765425 0.002059026 0.002315541 0.002593731 0.002799708 0.003054660 0.003229166 0.003672832 0.003906521 0.004489301 0.004717319 0.004863696 0.005158084 0.005314638 0.005994904 0.006347002 0.006503004 0.006732172 0.006949523 0.007390726 0.008187757 0.008625865 0.008809358 0.009376040 0.009757930 0.009894714 0.010963683 0.011219685 0.011899761 0.012641046 0.013343497 0.013656586 0.013982369 0.014636056 0.014872660 0.015426095 0.015875315 0.016000924 0.016807619 0.018651457 0.019261936 0.019445487 0.020208632 0.020545567 0.021545155 0.021761452 0.022462639 0.022815192 0.023560241 0.023774447 0.024591533 0.025908183 0.026522378 0.027098776 0.027205781 0.027704027 0.028497206 0.028689211 0.029642033 0.031213427 0.031582760 0.034270530 0.034823266 0.036036113 0.039101768 0.039690268 0.042012521 0.045477328 0.046117418 0.046707507 0.048867608 0.049701831 0.050097839 0.050838790 0.051555115 0.052228520 0.052295602 0.052421296 0.053039536 0.053651745 0.055012067 0.056116370 0.056453608 0.056702414 0.056932673 0.057052356 0.057826907 0.058656454 0.059296829 0.059830095 0.061348846 0.062172966 0.062989218 0.064351747 0.064616127 0.065141561 0.066067741 0.067620170 0.067855439 0.069032463 0.070400603 0.071153339 0.072113512 0.072533144 0.072957041 0.073186213 0.078666369 0.080271907 0.081786232 0.082496371 0.083486362 0.084641742 0.089160828 0.089510934 0.089838259 0.091348099 0.093348380 0.094588549 0.095510517 0.096302618 0.096877155 0.098600545 0.100192469 0.100709587 0.102824563 0.104010142 0.104791248 0.107005590 0.109689418 0.111111490 0.112538723 0.112973996 0.114037452 0.115025704 0.117024924 0.117454695 0.118634437 0.119195620 0.120696655 0.122239649 0.125095227 0.125881864 0.128766012 0.129077914 0.131118123 0.133897411 0.137045622 0.137976269 0.138634866 0.139793319 0.140402726 0.143423291 0.144549781 0.145917897 0.146820830 0.152006440 0.153603068 0.154105529 0.159395398 0.160837381 0.168582852 0.171486269 0.176692396 0.179234227 0.181683002 0.184541276 0.189225003 0.190785683 0.192006936 0.201394236 0.202262090 0.206376087 0.206972652 0.207275793 0.212511968 0.212994199 0.215651521 0.216997834 0.220423045 0.220939574 0.224633234 0.225183342 0.227209831 0.231920631 0.234632875 0.236280976 0.238609866 0.246323908 0.248455487 0.252810707 0.256624278 0.257250781 0.258362995 0.262589966 0.271610260 0.282932298 0.292075598 0.300167742 0.300283814 0.301139673 0.307218737 0.307815109 0.309864529 0.320027856 0.321419648 0.326514928 0.330967561 0.336692862 0.347811203 0.352052107 0.355654746 0.360882766 0.362171789 0.364160214 0.384578933 0.407897137 0.414433715 0.430327829 0.431526372 0.435503608 0.451176059 0.465066505 0.475722390 0.479035098 0.480522321 0.486872650 0.498908233 0.503884002 0.515265797 0.518081959 0.544100114 0.566947960 0.567774667 0.586940403 0.591762509 0.606123685 0.644312107 0.645863272 0.668165327 0.675658149 0.687431525 0.703611837 0.704168085 0.704445852 0.711809511 0.717378440 0.734385573 0.738046142 0.739790240 0.746992536 0.750936712 0.771637521 0.776007503 0.809429548 0.821897353 0.824337093 0.828958511 0.834355229 0.848411372 0.849620542 0.851441127 0.854815781 0.863553012 0.867479556 0.876020819 0.887599548 0.891426478 0.892369701 0.893805596 0.902142325 0.910663445 0.917988339 0.922686323 0.924571867 0.932049661 0.936365525 0.956186425 0.962663067 0.965412301 0.970135288 0.977128251 0.982593661 0.998810947 1.013122508 1.016328217 1.022019801 1.040348602 1.055574449 1.071522357 1.073174957 1.080731382 1.087635537 1.108647254 1.110445138 1.118326836 1.119322374 1.122642585 1.124046554 1.141956686 1.150179568 1.161785808 1.170209253 1.177606089 1.189096664 1.200841643 1.222230172 1.234296663 1.258313935 1.296562772 1.299937165 1.314806662 1.326483410 1.327502170 1.330396919 1.331488064 1.334852088 1.342658899 1.349294089 1.369256524 1.380023141 1.381351970 1.381972685 1.429498873 1.512495976 1.558003024 1.684872831 1.922798326</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">315</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.92163199" y3="-0.95336313" z3="-0.68666311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60477147" y3="-1.94680882" z3="-1.55651371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08555826" y3="-0.99337461" z3="-1.41892104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77183243" y3="1.47786105" z3="-1.07299007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28818607" y3="0.31133286" z3="-0.50598997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64953636" y3="2.73446767" z3="-1.15511776">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00015785" y3="2.7345525" z3="-0.85379763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37169403" y3="4.99024482" z3="-0.37553374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80147464" y3="3.84760804" z3="-0.88548087">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.74491684" y3="5.86462901" z3="-0.17721815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08430544" y3="1.60811519" z3="-1.67922361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12948214" y3="0.35720618" z3="0.21431742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71453904" y3="0.37732825" z3="-0.64141665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60960933" y3="0.72119967" z3="0.28828066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66927238" y3="-0.86329448" z3="-1.50529579">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.10079563" y3="-2.48168525" z3="-1.31920025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.03423239" y3="-5.51603518" z3="-6.26078847">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76605718" y3="-5.07756908" z3="-5.29530494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06271685" y3="-3.92670531" z3="-2.84417846">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73638008" y3="-3.69651374" z3="-5.15267165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4728868" y3="-5.89986941" z3="-4.20452251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13581198" y3="-5.31833989" z3="-2.9887537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39386364" y3="-3.08930403" z3="-3.93387069">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97219393" y3="-3.03269789" z3="-5.98811286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52050603" y3="-6.98804621" z3="-4.29436471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94526667" y3="-5.94797279" z3="-2.1154789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65804598" y3="-3.37429671" z3="-1.60194179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34500135" y3="-3.85365558" z3="-0.85827064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69194786" y3="-4.85411672" z3="-1.1298628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38298824" y3="-3.55526167" z3="0.59085455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42510911" y3="-3.09015746" z3="3.3510774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69930527" y3="-4.59168137" z3="1.47799766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1065975" y3="-2.28174488" z3="1.09715648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12522601" y3="-2.0512622" z3="2.4684475">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7116249" y3="-4.36137971" z3="2.85236588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8943126" y3="-5.59743132" z3="1.09382853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10916435" y3="-1.44019856" z3="0.43762409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10403244" y3="-1.04582512" z3="2.83199855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92467337" y3="-5.18707006" z3="3.53633799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42886753" y3="-2.91273895" z3="4.43047828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35088839" y3="-1.75328224" z3="-3.90860724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.48072382" y3="-1.34493132" z3="-3.00696904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33066839" y3="3.70687163" z3="-1.03792818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12625643" y3="-2.97683981" z3="-1.7123191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91673572" y3="-3.15337598" z3="-0.57263164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10577626" y3="-2.28049542" z3="0.36216292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.82718022" y3="-0.71224112" z3="0.61935905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68332303" y3="-0.23611414" z3="-0.96853236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.51662881" y3="0.45524938" z3="1.21727324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07628416" y3="-1.04982984" z3="1.97158619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40864872" y3="-4.36229133" z3="-0.34270989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13188096" y3="-4.60054683" z3="0.85544994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98200775" y3="0.07406983" z3="-1.75900577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35533377" y3="0.6203309" z3="-0.77796725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29715183" y3="-1.06815939" z3="-1.35884118">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.62108978" y3="0.55089608" z3="0.57597165">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16550932" y3="0.14887729" z3="2.21813528">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.97929929" y3="1.45524931" z3="1.31149895">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53548831" y3="-0.10063458" z3="2.3021816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.890123" y3="-1.71406418" z3="1.63126101">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59166225" y3="-1.51388138" z3="2.84891505">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06393494" y3="-4.01226686" z3="0.87025766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52208867" y3="-4.3524982" z3="1.73823507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.37017279" y3="-5.67230814" z3="0.84521313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28614769" y3="-2.19516963" z3="-0.17370594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.14138234" y3="-3.29467329" z3="-1.03204879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49736414" y3="-4.45239522" z3="-0.61174731">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00271716" y3="-4.50520803" z3="0.68591181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.154264" y3="-3.44496137" z3="1.57471001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78960684" y3="-2.29011696" z3="1.13609111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49580118" y3="-3.22567111" z3="-2.06377231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35404221" y3="-5.29450127" z3="-1.28953001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26344485" y3="-5.69143245" z3="1.11981313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74946909" y3="-3.5237435" z3="2.58472704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.88561882" y3="-1.44115852" z3="1.81433822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49403773" y3="4.01711252" z3="0.05194232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86583016" y3="3.81028779" z3="-0.00634937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.41084647" y3="3.2923725" z3="-1.17608469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62544683" y3="3.00445453" z3="-2.28953531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25376956" y3="3.20890089" z3="-2.21164303">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04382048" y3="4.38047464" z3="0.97891725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.51042631" y3="4.02350943" z3="0.8469668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84824323" y3="3.01418799" z3="-1.2279662">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.09035351" y3="2.61195529" z3="-3.19476956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37560258" y3="2.95964944" z3="-3.06741401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16848791" y3="-5.89893645" z3="2.30845958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76974254" y3="-6.3959021" z3="0.25825067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33924035" y3="2.75424652" z3="-2.30522592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46908355" y3="3.04130305" z3="-0.18165663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62188419" y3="0.16737107" z3="-2.03407264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94399642" y3="1.41323157" z3="-1.89503035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80013446" y3="0.09770058" z3="-2.82772301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27358677" y3="1.20553475" z3="-3.48585803">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31725626" y3="-0.86283693" z3="-2.91482728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1773841" y3="1.13962132" z3="-4.09792382">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44284586" y3="2.53446426" z3="-2.61569392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57582567" y3="2.43337925" z3="-3.38683374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90973884" y3="3.48568207" z3="-2.55864911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93785488" y3="3.30826904" z3="-3.93423243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57375558" y3="3.90554389" z3="-0.25691725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75360533" y3="5.05495868" z3="-0.05990259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92447996" y3="3.96118508" z3="0.18898282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44087073" y3="5.10692047" z3="0.74511468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55596948" y3="3.07545646" z3="0.09080571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48169522" y3="5.12349688" z3="1.08097335">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.3207781" y3="6.23071809" z3="0.50486799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.63692998" y3="6.26268799" z3="0.89347872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.6820175" y3="7.10916284" z3="0.63493152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06178877" y3="7.17057691" z3="1.33051586">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34532086" y3="-3.9190376" z3="-2.87917657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53450862" y3="-4.95469414" z3="-2.5578129">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21372032" y3="-3.58811817" z3="-3.47973832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46771176" y3="-3.91602827" z3="-3.54492786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.67991014" y3="-1.59023567" z3="-2.08976888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41327439" y3="-1.1092653" z3="-2.76228431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5115916" y3="-0.93213345" z3="-1.22267865">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73126337" y3="-1.63745864" z3="-2.64760673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9216,-.9534,-.6867;6.6048,-1.9468,-1.5565;6.0856,-.9934,-1.4189;4.7718,1.4779,-1.073;4.2882,.3113,-.506;2.6495,2.7345,-1.1551;4.0002,2.7346,-.8538;2.3717,4.9902,-.3755;1.8015,3.8476,-.8855;1.7449,5.8646,-.1772;2.0843,1.6081,-1.6792;3.1295,.3572,.2143;1.7145,.3773,-.6414;.6096,.7212,.2883;1.6693,-.8633,-1.5053;1.1008,-2.4817,-1.3192;2.0342,-5.516,-6.2608;1.7661,-5.0776,-5.2953;1.0627,-3.9267,-2.8442;1.7364,-3.6965,-5.1527;1.4729,-5.8999,-4.2045;1.1358,-5.3183,-2.9888;1.3939,-3.0893,-3.9339;1.9722,-3.0327,-5.9881;1.5205,-6.988,-4.2944;.9453,-5.948,-2.1155;.658,-3.3743,-1.6019;-.345,-3.8537,-.8583;-.6919,-4.8541,-1.1299;-.383,-3.5553,.5909;-.4251,-3.0902,3.3511;-.6993,-4.5917,1.478;-.1066,-2.2817,1.0972;-.1252,-2.0513,2.4684;-.7116,-4.3614,2.8524;-.8943,-5.5974,1.0938;.1092,-1.4402,.4376;.104,-1.0458,2.832;-.9247,-5.1871,3.5363;-.4289,-2.9127,4.4305;1.3509,-1.7533,-3.9086;1.4807,-1.3449,-3.007;.3307,3.7069,-1.0379;-2.1263,-2.9768,-1.7123;-2.9167,-3.1534,-.5726;-3.1058,-2.2805,.3622;-3.8272,-.7122,.6194;-4.6833,-.2361,-.9685;-2.5166,.4552,1.2173;-5.0763,-1.0498,1.9716;-3.4086,-4.3623,-.3427;-4.1319,-4.6005,.8554;-3.982,.0741,-1.759;-5.3553,.6203,-.778;-5.2972,-1.0682,-1.3588;-1.6211,.5509,.576;-2.1655,.1489,2.2181;-2.9793,1.4552,1.3115;-5.5355,-.1006,2.3022;-5.8901,-1.7141,1.6313;-4.5917,-1.5139,2.8489;-5.0639,-4.0123,.8703;-3.5221,-4.3525,1.7382;-4.3702,-5.6723,.8452;4.2861,-2.1952,-.1737;4.1414,-3.2947,-1.032;3.4974,-4.4524,-.6117;3.0027,-4.5052,.6859;3.1543,-3.445,1.5747;3.7896,-2.2901,1.1361;4.4958,-3.2257,-2.0638;3.354,-5.2945,-1.2895;2.2634,-5.6914,1.1198;2.7495,-3.5237,2.5847;3.8856,-1.4412,1.8143;-.494,4.0171,.0519;-1.8658,3.8103,-.0063;-2.4108,3.2924,-1.1761;-1.6254,3.0045,-2.2895;-.2538,3.2089,-2.2116;-.0438,4.3805,.9789;-2.5104,4.0235,.847;-3.8482,3.0142,-1.228;-2.0904,2.612,-3.1948;.3756,2.9596,-3.0674;2.1685,-5.8989,2.3085;1.7697,-6.3959,.2583;-4.3392,2.7542,-2.3052;-4.4691,3.0413,-.1817;6.6219,.1674,-2.0341;5.944,1.4132,-1.895;7.8001,.0977,-2.8277;8.2736,1.2055,-3.4859;8.3173,-.8628,-2.9148;9.1774,1.1396,-4.0979;6.4428,2.5345,-2.6157;7.5758,2.4334,-3.3868;5.9097,3.4857,-2.5586;7.9379,3.3083,-3.9342;4.5738,3.9055,-.2569;3.7536,5.055,-.0599;5.9245,3.9612,.189;6.4409,5.1069,.7451;6.556,3.0755,.0908;7.4817,5.1235,1.081;4.3208,6.2307,.5049;5.6369,6.2627,.8935;3.682,7.1092,.6349;6.0618,7.1706,1.3305;-2.3453,-3.919,-2.8792;-2.5345,-4.9547,-2.5578;-3.2137,-3.5881,-3.4797;-1.4677,-3.916,-3.5449;-1.6799,-1.5902,-2.0898;-2.4133,-1.1093,-2.7623;-1.5116,-.9321,-1.2227;-.7313,-1.6375,-2.6476;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662927386371</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000610254325 0.000120253038 0.017714318872 0.005326348063</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057141430 -0.000148515 0.000063678 0.000152498 0.000230566 0.000324814 0.000406088 0.000526909 0.000704581 0.000778219 0.000912457 0.001012398 0.001181156 0.001260580 0.001378261 0.001479925 0.001586783 0.001705410 0.001765532 0.002059334 0.002315663 0.002594297 0.002799700 0.003054771 0.003228890 0.003672832 0.003906707 0.004490120 0.004717736 0.004864171 0.005157972 0.005316524 0.005994691 0.006347405 0.006502962 0.006732035 0.006950976 0.007391478 0.008187742 0.008625681 0.008809435 0.009376390 0.009758951 0.009896405 0.010963981 0.011219691 0.011899704 0.012641059 0.013343617 0.013658594 0.013982370 0.014637033 0.014875165 0.015426116 0.015876169 0.016000795 0.016809075 0.018651636 0.019263354 0.019445460 0.020208646 0.020545867 0.021545509 0.021761495 0.022463664 0.022815514 0.023565485 0.023774287 0.024594041 0.025908326 0.026522833 0.027098760 0.027207150 0.027711719 0.028499440 0.028709442 0.029645042 0.031232324 0.031582702 0.034271535 0.034824728 0.036037067 0.039102381 0.039690254 0.042012525 0.045479401 0.046117018 0.046706537 0.048867962 0.049701919 0.050097867 0.050838787 0.051555125 0.052228514 0.052295711 0.052421537 0.053039893 0.053651724 0.055013164 0.056116283 0.056453672 0.056702241 0.056932427 0.057052365 0.057826869 0.058656922 0.059297140 0.059832865 0.061348811 0.062173237 0.062989592 0.064351824 0.064621849 0.065141546 0.066069664 0.067620351 0.067857059 0.069032558 0.070400583 0.071154031 0.072114933 0.072533547 0.072958876 0.073197154 0.078666422 0.080271647 0.081786869 0.082498765 0.083486631 0.084641715 0.089161029 0.089511709 0.089839009 0.091347966 0.093348514 0.094588866 0.095510577 0.096303070 0.096877693 0.098603329 0.100192291 0.100709364 0.102824782 0.104010587 0.104793786 0.107008308 0.109695263 0.111112485 0.112538718 0.112976550 0.114037391 0.115032928 0.117025264 0.117454679 0.118634199 0.119195589 0.120696815 0.122241040 0.125094905 0.125883458 0.128766965 0.129081959 0.131119562 0.133897397 0.137049442 0.137976527 0.138634762 0.139801015 0.140402653 0.143423267 0.144550295 0.145920226 0.146820790 0.152006005 0.153600962 0.154107505 0.159396615 0.160837176 0.168583099 0.171486442 0.176692369 0.179234997 0.181684463 0.184541193 0.189225231 0.190785678 0.192007176 0.201394260 0.202262345 0.206376341 0.206972798 0.207276041 0.212512057 0.212999654 0.215653318 0.216997921 0.220422993 0.220939835 0.224633180 0.225188882 0.227209906 0.231920773 0.234634784 0.236281394 0.238611307 0.246325774 0.248453721 0.252814447 0.256624559 0.257250786 0.258363669 0.262589986 0.271610424 0.282933181 0.292077494 0.300169294 0.300283753 0.301139660 0.307219458 0.307815256 0.309864809 0.320035045 0.321420924 0.326514931 0.330967505 0.336693395 0.347814442 0.352053610 0.355654726 0.360882436 0.362171775 0.364160416 0.384578727 0.407947125 0.414434033 0.430328777 0.431526331 0.435504734 0.451176409 0.465105601 0.475725785 0.479036179 0.480523815 0.486893041 0.498908245 0.503888684 0.515266706 0.518086990 0.544107548 0.566948718 0.567780350 0.586942258 0.591764482 0.606123823 0.644314424 0.645868892 0.668166041 0.675659679 0.687431739 0.703614852 0.704173177 0.704447007 0.711825670 0.717386998 0.734389582 0.738046141 0.739794407 0.746995453 0.750941572 0.771638418 0.776009395 0.809431217 0.821899838 0.824337621 0.828958489 0.834355290 0.848411559 0.849621292 0.851442856 0.854824104 0.863554998 0.867479929 0.876021206 0.887600148 0.891430480 0.892373844 0.893806382 0.902142423 0.910663515 0.917988550 0.922685963 0.924571871 0.932050455 0.936384400 0.956192886 0.962664175 0.965412374 0.970137756 0.977130191 0.982594073 0.998823747 1.013124066 1.016329531 1.022023360 1.040351982 1.055606719 1.071541857 1.073180732 1.080736288 1.087635658 1.108665197 1.110446093 1.118327596 1.119322638 1.122643323 1.124049914 1.141958885 1.150183783 1.161786048 1.170209883 1.177611763 1.189099129 1.200841706 1.222231177 1.234296655 1.258315542 1.296567791 1.299948439 1.314809600 1.326483711 1.327508368 1.330398660 1.331489186 1.334852093 1.342661363 1.349299526 1.369260121 1.380023940 1.381352296 1.381981686 1.429499222 1.512500235 1.558003199 1.684873383 1.922797526</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">316</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91695086" y3="-0.9543281" z3="-0.6883193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59791624" y3="-1.94935448" z3="-1.56055676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07988813" y3="-0.99540887" z3="-1.42214842">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76999448" y3="1.47725988" z3="-1.07355786">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28537654" y3="0.31116308" z3="-0.50640571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.64980042" y3="2.73743977" z3="-1.15257889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00072912" y3="2.73508348" z3="-0.85285378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37651785" y3="4.99323767" z3="-0.3720368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80394135" y3="3.85188865" z3="-0.88196424">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75087632" y3="5.86873835" z3="-0.17008324">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.0819688" y3="1.61206283" z3="-1.67577253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.127945" y3="0.3585631" z3="0.21574387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71112289" y3="0.38250843" z3="-0.63695941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60922088" y3="0.72932225" z3="0.29513754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66063561" y3="-0.85795239" z3="-1.50083094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09780192" y3="-2.4778699" z3="-1.31808124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0461076" y3="-5.50777704" z3="-6.25868359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77502034" y3="-5.07059966" z3="-5.29345938">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06463161" y3="-3.92298123" z3="-2.84286981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.74271521" y3="-3.68977121" z3="-5.14971236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.4807109" y3="-5.89426667" z3="-4.2040655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.14009434" y3="-5.31435944" z3="-2.98853902">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39661365" y3="-3.08416432" z3="-3.93117291">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97925934" y3="-3.02480384" z3="-5.98396733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53025319" y3="-6.98225683" z3="-4.29477999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94875193" y3="-5.94516653" z3="-2.11633043">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65769442" y3="-3.37167455" z3="-1.60098275">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34389407" y3="-3.85353262" z3="-0.85667058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68756872" y3="-4.85550256" z3="-1.12658176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38219644" y3="-3.55246221" z3="0.59183429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42162366" y3="-3.07961776" z3="3.35071112">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6941648" y3="-4.58740818" z3="1.48202465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10953606" y3="-2.27632465" z3="1.09426801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12585627" y3="-2.04243442" z3="2.46506948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.7052534" y3="-4.35312468" z3="2.85587478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8868989" y3="-5.59429801" z3="1.10063034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10300577" y3="-1.43639962" z3="0.43197721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10184756" y3="-1.0356922" z3="2.82544719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91466722" y3="-5.1775367" z3="3.54267421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42359885" y3="-2.8997649" z3="4.429779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.35149553" y3="-1.74829379" z3="-3.90510619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47789491" y3="-1.33984529" z3="-3.00293783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33274382" y3="3.71263293" z3="-1.03333232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12768581" y3="-2.98455087" z3="-1.71281738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91740908" y3="-3.15869802" z3="-0.57217734">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1092282" y3="-2.28251017" z3="0.35890258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83300094" y3="-0.71475127" z3="0.61268965">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68390937" y3="-0.23798231" z3="-0.97798061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5241325" y3="0.45262258" z3="1.21414241">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08587175" y3="-1.05275967" z3="1.96058164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40535424" y3="-4.36824069" z3="-0.3371843">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12628186" y3="-4.60434444" z3="0.86266242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.980325" y3="0.07419675" z3="-1.76551939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35740316" y3="0.61760735" z3="-0.78888076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29569928" y3="-1.06994663" z3="-1.37136061">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.6308787" y3="0.55349795" z3="0.57097713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16957193" y3="0.14164423" z3="2.21237033">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.98863155" y3="1.45076759" z3="1.31516998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.5470941" y3="-0.10397583" z3="2.28987608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89792666" y3="-1.71757488" z3="1.61712075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60397901" y3="-1.51643251" z3="2.83962912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06092691" y3="-4.01990299" z3="0.87611375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51669817" y3="-4.35104784" z3="1.74365743">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35988201" y3="-5.6776086" z3="0.8575925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28161392" y3="-2.1960341" z3="-0.17485377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13950891" y3="-3.29678447" z3="-1.03218679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49663551" y3="-4.45471662" z3="-0.61156341">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00064369" y3="-4.50697731" z3="0.68557834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14951506" y3="-3.4456721" z3="1.57346276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.783507" y3="-2.29032311" z3="1.13447535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49502642" y3="-3.22861787" z3="-2.06360893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35509309" y3="-5.2972092" z3="-1.28883825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.2629505" y3="-5.69404268" z3="1.11986157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74367971" y3="-3.52395097" z3="2.58311205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87695733" y3="-1.44028637" z3="1.81197894">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49111359" y3="4.01772144" z3="0.05852741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86287607" y3="3.80995913" z3="0.00072051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40854618" y3="3.29641917" z3="-1.17080711">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.62394667" y3="3.0142653" z3="-2.28629592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.25230543" y3="3.21952188" z3="-2.2085917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04018597" y3="4.37728233" z3="0.9866705">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50683129" y3="4.01882758" z3="0.85562746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84547139" y3="3.01585469" z3="-1.22244141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08935959" y3="2.62512602" z3="-3.19268136">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37628882" y3="2.97518292" z3="-3.06664716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16851669" y3="-5.90154504" z3="2.30860436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76987833" y3="-6.39931399" z3="0.25855667">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33593566" y3="2.75502784" z3="-2.29973306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46658295" y3="3.04202885" z3="-0.17640442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61678408" y3="0.16472671" z3="-2.0378345">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94077085" y3="1.41139298" z3="-1.89745243">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79370921" y3="0.09363085" z3="-2.83330617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26760099" y3="1.20092761" z3="-3.49198085">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30936313" y3="-0.8675673" z3="-2.92137818">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17036142" y3="1.13396584" z3="-4.10542999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.43990808" y3="2.53201224" z3="-2.61885769">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57155456" y3="2.42957759" z3="-3.39175735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.90807472" y3="3.48382388" z3="-2.5610182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93384919" y3="3.30403267" z3="-3.93964729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57719561" y3="3.90493342" z3="-0.25669957">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75909738" y3="5.05554518" z3="-0.05823048">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92829562" y3="3.95808979" z3="0.1880203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44737937" y3="5.10275667" z3="0.7437019">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55724215" y3="3.07179801" z3="0.09236602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48797861" y3="5.11754769" z3="1.07942779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32862275" y3="6.22998145" z3="0.5071079">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64554625" y3="6.25962838" z3="0.89364927">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69078666" y3="7.10980302" z3="0.64190184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07205791" y3="7.16645747" z3="1.33154849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34490382" y3="-3.93220021" z3="-2.87592319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53138766" y3="-4.96701501" z3="-2.55029729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21436693" y3="-3.60583249" z3="-3.47729947">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46773436" y3="-3.92935044" z3="-3.54232195">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68541574" y3="-1.59797437" z3="-2.09563071">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.41988957" y3="-1.12141585" z3="-2.76968423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.51933417" y3="-0.93698382" z3="-1.23062991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73552111" y3="-1.64430632" z3="-2.65230214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.917,-.9543,-.6883;6.5979,-1.9494,-1.5606;6.0799,-.9954,-1.4221;4.77,1.4773,-1.0736;4.2854,.3112,-.5064;2.6498,2.7374,-1.1526;4.0007,2.7351,-.8529;2.3765,4.9932,-.372;1.8039,3.8519,-.882;1.7509,5.8687,-.1701;2.082,1.6121,-1.6758;3.1279,.3586,.2157;1.7111,.3825,-.637;.6092,.7293,.2951;1.6606,-.858,-1.5008;1.0978,-2.4779,-1.3181;2.0461,-5.5078,-6.2587;1.775,-5.0706,-5.2935;1.0646,-3.923,-2.8429;1.7427,-3.6898,-5.1497;1.4807,-5.8943,-4.2041;1.1401,-5.3144,-2.9885;1.3966,-3.0842,-3.9312;1.9793,-3.0248,-5.984;1.5303,-6.9823,-4.2948;.9488,-5.9452,-2.1163;.6577,-3.3717,-1.601;-.3439,-3.8535,-.8567;-.6876,-4.8555,-1.1266;-.3822,-3.5525,.5918;-.4216,-3.0796,3.3507;-.6942,-4.5874,1.482;-.1095,-2.2763,1.0943;-.1259,-2.0424,2.4651;-.7053,-4.3531,2.8559;-.8869,-5.5943,1.1006;.103,-1.4364,.432;.1018,-1.0357,2.8254;-.9147,-5.1775,3.5427;-.4236,-2.8998,4.4298;1.3515,-1.7483,-3.9051;1.4779,-1.3398,-3.0029;.3327,3.7126,-1.0333;-2.1277,-2.9846,-1.7128;-2.9174,-3.1587,-.5722;-3.1092,-2.2825,.3589;-3.833,-.7148,.6127;-4.6839,-.238,-.978;-2.5241,.4526,1.2141;-5.0859,-1.0528,1.9606;-3.4054,-4.3682,-.3372;-4.1263,-4.6043,.8627;-3.9803,.0742,-1.7655;-5.3574,.6176,-.7889;-5.2957,-1.0699,-1.3714;-1.6309,.5535,.571;-2.1696,.1416,2.2124;-2.9886,1.4508,1.3152;-5.5471,-.104,2.2899;-5.8979,-1.7176,1.6171;-4.604,-1.5164,2.8396;-5.0609,-4.0199,.8761;-3.5167,-4.351,1.7437;-4.3599,-5.6776,.8576;4.2816,-2.196,-.1749;4.1395,-3.2968,-1.0322;3.4966,-4.4547,-.6116;3.0006,-4.507,.6856;3.1495,-3.4457,1.5735;3.7835,-2.2903,1.1345;4.495,-3.2286,-2.0636;3.3551,-5.2972,-1.2888;2.263,-5.694,1.1199;2.7437,-3.524,2.5831;3.877,-1.4403,1.812;-.4911,4.0177,.0585;-1.8629,3.81,.0007;-2.4085,3.2964,-1.1708;-1.6239,3.0143,-2.2863;-.2523,3.2195,-2.2086;-.0402,4.3773,.9867;-2.5068,4.0188,.8556;-3.8455,3.0159,-1.2224;-2.0894,2.6251,-3.1927;.3763,2.9752,-3.0666;2.1685,-5.9015,2.3086;1.7699,-6.3993,.2586;-4.3359,2.755,-2.2997;-4.4666,3.042,-.1764;6.6168,.1647,-2.0378;5.9408,1.4114,-1.8975;7.7937,.0936,-2.8333;8.2676,1.2009,-3.492;8.3094,-.8676,-2.9214;9.1704,1.134,-4.1054;6.4399,2.532,-2.6189;7.5716,2.4296,-3.3918;5.9081,3.4838,-2.561;7.9338,3.304,-3.9396;4.5772,3.9049,-.2567;3.7591,5.0555,-.0582;5.9283,3.9581,.188;6.4474,5.1028,.7437;6.5572,3.0718,.0924;7.488,5.1175,1.0794;4.3286,6.23,.5071;5.6455,6.2596,.8936;3.6908,7.1098,.6419;6.0721,7.1665,1.3315;-2.3449,-3.9322,-2.8759;-2.5314,-4.967,-2.5503;-3.2144,-3.6058,-3.4773;-1.4677,-3.9294,-3.5423;-1.6854,-1.598,-2.0956;-2.4199,-1.1214,-2.7697;-1.5193,-.937,-1.2306;-.7355,-1.6443,-2.6523;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929644173</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000655302604 0.000124648188 0.018681375457 0.005322778063</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057141881 -0.000001828 0.000046389 0.000132501 0.000222770 0.000336230 0.000406245 0.000526881 0.000704538 0.000778724 0.000912834 0.001012474 0.001183420 0.001262925 0.001378291 0.001480018 0.001586681 0.001705346 0.001765653 0.002059336 0.002315624 0.002596440 0.002799834 0.003054960 0.003229565 0.003672791 0.003907012 0.004490675 0.004718290 0.004864812 0.005157834 0.005319127 0.005994815 0.006347056 0.006504195 0.006731889 0.006951632 0.007392945 0.008187837 0.008625697 0.008809337 0.009376501 0.009759438 0.009899058 0.010964823 0.011219728 0.011899597 0.012641033 0.013343563 0.013661560 0.013982357 0.014638953 0.014880187 0.015425928 0.015878213 0.016000807 0.016811666 0.018652106 0.019263977 0.019445423 0.020208711 0.020546885 0.021545604 0.021761339 0.022465868 0.022816154 0.023572241 0.023773919 0.024597940 0.025908607 0.026523080 0.027098757 0.027208829 0.027718798 0.028503703 0.028731219 0.029646199 0.031258872 0.031582666 0.034272732 0.034827233 0.036039450 0.039102998 0.039691265 0.042012889 0.045480785 0.046116690 0.046706122 0.048868012 0.049702077 0.050097873 0.050838787 0.051555125 0.052228494 0.052295765 0.052421700 0.053040141 0.053651723 0.055014132 0.056116236 0.056453861 0.056702598 0.056931947 0.057052261 0.057826819 0.058657020 0.059297243 0.059835598 0.061349073 0.062173702 0.062990205 0.064351888 0.064630257 0.065141624 0.066071714 0.067620336 0.067859861 0.069032814 0.070401365 0.071155407 0.072117130 0.072533837 0.072962159 0.073207316 0.078666570 0.080271296 0.081786946 0.082499723 0.083486687 0.084641658 0.089161019 0.089512285 0.089839573 0.091347910 0.093348495 0.094589374 0.095510522 0.096303423 0.096878722 0.098606340 0.100192227 0.100709177 0.102825046 0.104011605 0.104795543 0.107010959 0.109697903 0.111113961 0.112538879 0.112978292 0.114037452 0.115037529 0.117025614 0.117454571 0.118634099 0.119195518 0.120696837 0.122242804 0.125094862 0.125884471 0.128767416 0.129086351 0.131119954 0.133897738 0.137052081 0.137976455 0.138635192 0.139809793 0.140402696 0.143423374 0.144550581 0.145923201 0.146820703 0.152005644 0.153599312 0.154110336 0.159398191 0.160837028 0.168583122 0.171486580 0.176691792 0.179237703 0.181686401 0.184541458 0.189225318 0.190785685 0.192006474 0.201394237 0.202262345 0.206376565 0.206972961 0.207276753 0.212512049 0.213003563 0.215657396 0.216997956 0.220422726 0.220939739 0.224632255 0.225196894 0.227210048 0.231920861 0.234636991 0.236282101 0.238613138 0.246327681 0.248454238 0.252816649 0.256624683 0.257250906 0.258364268 0.262590041 0.271610424 0.282935483 0.292079618 0.300171328 0.300283767 0.301139725 0.307220123 0.307815333 0.309865407 0.320039653 0.321424596 0.326514920 0.330968232 0.336694187 0.347819397 0.352055909 0.355654722 0.360882165 0.362172242 0.364160684 0.384578637 0.408000698 0.414436962 0.430330456 0.431528308 0.435505460 0.451176511 0.465161284 0.475728209 0.479038372 0.480527422 0.486922711 0.498908250 0.503895151 0.515266584 0.518093665 0.544111038 0.566950873 0.567787930 0.586942730 0.591765741 0.606124418 0.644314431 0.645870342 0.668166070 0.675660329 0.687432029 0.703615421 0.704183653 0.704447072 0.711834543 0.717397831 0.734391712 0.738046235 0.739796754 0.747006405 0.750945419 0.771638929 0.776011814 0.809433386 0.821901920 0.824337727 0.828959425 0.834356503 0.848411544 0.849621643 0.851446905 0.854829078 0.863556334 0.867480453 0.876021239 0.887600224 0.891431556 0.892382988 0.893810151 0.902144038 0.910663539 0.917988521 0.922685774 0.924571880 0.932051347 0.936404606 0.956204118 0.962664226 0.965412588 0.970138633 0.977130610 0.982594152 0.998837366 1.013128991 1.016331000 1.022026503 1.040359709 1.055641951 1.071562371 1.073185108 1.080737797 1.087635808 1.108700667 1.110448103 1.118329660 1.119322937 1.122644385 1.124052582 1.141960125 1.150184525 1.161786289 1.170210575 1.177613353 1.189102424 1.200842848 1.222231143 1.234296699 1.258317017 1.296576463 1.299949642 1.314813594 1.326483726 1.327509897 1.330400861 1.331493850 1.334852176 1.342661352 1.349311504 1.369268702 1.380024742 1.381353523 1.381998949 1.429499145 1.512500986 1.558003182 1.684873822 1.922798269</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">317</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91298876" y3="-0.95520201" z3="-0.68777053">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59369469" y3="-1.95169638" z3="-1.55891958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07666269" y3="-0.9972146" z3="-1.42040991">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.76967902" y3="1.47692902" z3="-1.07085755">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28296658" y3="0.31096199" z3="-0.50508351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65137248" y3="2.74005109" z3="-1.15063962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00202921" y3="2.7357953" z3="-0.84998911">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38044904" y3="4.99651044" z3="-0.37073599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80682163" y3="3.85574996" z3="-0.88080768">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75621412" y3="5.87269376" z3="-0.17122003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08229019" y3="1.61548029" z3="-1.67426213">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12543771" y3="0.35916191" z3="0.21678178">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70832658" y3="0.3869152" z3="-0.63537384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60775534" y3="0.73638512" z3="0.29730883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65400127" y3="-0.85307803" z3="-1.49980884">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09417629" y3="-2.47343487" z3="-1.31933127">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04191283" y3="-5.49618959" z3="-6.26413357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77135752" y3="-5.06073587" z3="-5.29797157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06221012" y3="-3.91758731" z3="-2.84489904">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73675275" y3="-3.68013772" z3="-5.15242076">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47995845" y3="-5.88633314" z3="-4.20921391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13989138" y3="-5.30864533" z3="-2.99247217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39121294" y3="-3.07674805" z3="-3.93260501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9709574" y3="-3.01363976" z3="-5.98615254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53123972" y3="-6.97413248" z3="-4.30143274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95051071" y3="-5.94100084" z3="-2.12092885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.6559338" y3="-3.36832363" z3="-1.60191481">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34279674" y3="-3.85292939" z3="-0.85572766">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68327103" y3="-4.85680046" z3="-1.12288263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37995683" y3="-3.54794866" z3="0.5920642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41315293" y3="-3.06743944" z3="3.34968566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68499474" y3="-4.58169678" z3="1.48618674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.11127252" y3="-2.26941707" z3="1.0900907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12469072" y3="-2.03126224" z3="2.46003284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.693031" y3="-4.34354868" z3="2.85936966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8741293" y3="-5.59093965" z3="1.10849951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09566291" y3="-1.43055127" z3="0.42447237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.09997929" y3="-1.022234" z3="2.81644799">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89697185" y3="-5.16694383" z3="3.54900632">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41295099" y3="-2.88414483" z3="4.4281401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34356454" y3="-1.74095446" z3="-3.90476733">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47084345" y3="-1.3333537" z3="-3.00245612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33580542" y3="3.71728125" z3="-1.03358264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1316108" y3="-2.99288189" z3="-1.71183591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91846398" y3="-3.16533175" z3="-0.56898153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11165138" y3="-2.28610306" z3="0.3589394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83655648" y3="-0.71828523" z3="0.60913541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68604716" y3="-0.24318335" z3="-0.9825446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52867262" y3="0.45002385" z3="1.21127571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.09250245" y3="-1.05529234" z3="1.95521727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.4015556" y3="-4.37568097" z3="-0.32803426">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11832254" y3="-4.60975681" z3="0.87486908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98205541" y3="0.06793859" z3="-1.77008601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.35948651" y3="0.61270195" z3="-0.79468873">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.29758626" y3="-1.07561467" z3="-1.37537164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63440262" y3="0.5508576" z3="0.56892494">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17504511" y3="0.14013276" z3="2.21019326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99401239" y3="1.44838666" z3="1.31031671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.55561355" y3="-0.10634677" z3="2.28123318">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.90297392" y3="-1.72161977" z3="1.61085887">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.61238432" y3="-1.51687393" z3="2.83626173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05528701" y3="-4.02925217" z3="0.88819332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50741085" y3="-4.34929046" z3="1.7532183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34740785" y3="-5.68364383" z3="0.87476532">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27638331" y3="-2.19688656" z3="-0.17597858">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13545968" y3="-3.29694859" z3="-1.03425595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49452523" y3="-4.45649125" z3="-0.61441672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99863539" y3="-4.5105775" z3="0.68267232">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14538178" y3="-3.4494336" z3="1.57114924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77772458" y3="-2.29272715" z3="1.13299621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49118307" y3="-3.227491" z3="-2.06548245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3549697" y3="-5.2993951" z3="-1.29204545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26302367" y3="-5.69923932" z3="1.11591346">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73958149" y3="-3.52904943" z3="2.58070781">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87031348" y3="-1.44344591" z3="1.81121605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48871625" y3="4.02013833" z3="0.05835561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86011883" y3="3.81046745" z3="-0.00023804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40462736" y3="3.29715284" z3="-1.17226856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61942059" y3="3.01781468" z3="-2.28801455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24826568" y3="3.22530965" z3="-2.20988152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03858878" y3="4.37903881" z3="0.98709683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50453861" y3="4.01718325" z3="0.85478728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84101082" y3="3.01342932" z3="-1.22447822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08400694" y3="2.62887192" z3="-3.19487812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38117726" y3="2.98224403" z3="-3.06731227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16993968" y3="-5.90866188" z3="2.30437864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76983801" y3="-6.40369039" z3="0.25396693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.33068205" y3="2.75166162" z3="-2.30195418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46241026" y3="3.03785366" z3="-0.17850363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61568737" y3="0.16265929" z3="-2.03459998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94104605" y3="1.41007129" z3="-1.89390401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79337733" y3="0.0905998" z3="-2.82889059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.26930712" y3="1.1977629" z3="-3.48630668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.30794854" y3="-0.87122375" z3="-2.91708618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17262507" y3="1.13007394" z3="-4.09891015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44234335" y3="2.53062707" z3="-2.61394092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57463554" y3="2.4272771" z3="-3.38582762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91171891" y3="3.48319227" z3="-2.55580172">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.93853932" y3="3.30170234" z3="-3.93270704">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57945266" y3="3.90507159" z3="-0.25344891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76285682" y3="5.05693925" z3="-0.05594716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9306759" y3="3.95669424" z3="0.19136444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.45110865" y3="5.1009737" z3="0.74663001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55938439" y3="3.06906119" z3="0.09296793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.49235598" y3="5.11444551" z3="1.08141227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33413367" y3="6.23105071" z3="0.50809117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.65079207" y3="6.25918523" z3="0.89536616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69824631" y3="7.11153777" z3="0.638451">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07884234" y3="7.16594888" z3="1.33157474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34770467" y3="-3.94558972" z3="-2.87087845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53031671" y3="-4.97973349" z3="-2.54079257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21936825" y3="-3.62451386" z3="-3.47217286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47161187" y3="-3.94288723" z3="-3.53865216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69447914" y3="-1.60649107" z3="-2.10053607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43080309" y3="-1.13591777" z3="-2.77720237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53162329" y3="-0.94066761" z3="-1.23826635">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74464865" y3="-1.65084662" z3="-2.65673293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.913,-.9552,-.6878;6.5937,-1.9517,-1.5589;6.0767,-.9972,-1.4204;4.7697,1.4769,-1.0709;4.283,.311,-.5051;2.6514,2.7401,-1.1506;4.002,2.7358,-.85;2.3804,4.9965,-.3707;1.8068,3.8557,-.8808;1.7562,5.8727,-.1712;2.0823,1.6155,-1.6743;3.1254,.3592,.2168;1.7083,.3869,-.6354;.6078,.7364,.2973;1.654,-.8531,-1.4998;1.0942,-2.4734,-1.3193;2.0419,-5.4962,-6.2641;1.7714,-5.0607,-5.298;1.0622,-3.9176,-2.8449;1.7368,-3.6801,-5.1524;1.48,-5.8863,-4.2092;1.1399,-5.3086,-2.9925;1.3912,-3.0767,-3.9326;1.971,-3.0136,-5.9862;1.5312,-6.9741,-4.3014;.9505,-5.941,-2.1209;.6559,-3.3683,-1.6019;-.3428,-3.8529,-.8557;-.6833,-4.8568,-1.1229;-.38,-3.5479,.5921;-.4132,-3.0674,3.3497;-.685,-4.5817,1.4862;-.1113,-2.2694,1.0901;-.1247,-2.0313,2.46;-.693,-4.3435,2.8594;-.8741,-5.5909,1.1085;.0957,-1.4306,.4245;.1,-1.0222,2.8164;-.897,-5.1669,3.549;-.413,-2.8841,4.4281;1.3436,-1.741,-3.9048;1.4708,-1.3334,-3.0025;.3358,3.7173,-1.0336;-2.1316,-2.9929,-1.7118;-2.9185,-3.1653,-.569;-3.1117,-2.2861,.3589;-3.8366,-.7183,.6091;-4.686,-.2432,-.9825;-2.5287,.45,1.2113;-5.0925,-1.0553,1.9552;-3.4016,-4.3757,-.328;-4.1183,-4.6098,.8749;-3.9821,.0679,-1.7701;-5.3595,.6127,-.7947;-5.2976,-1.0756,-1.3754;-1.6344,.5509,.5689;-2.175,.1401,2.2102;-2.994,1.4484,1.3103;-5.5556,-.1063,2.2812;-5.903,-1.7216,1.6109;-4.6124,-1.5169,2.8363;-5.0553,-4.0293,.8882;-3.5074,-4.3493,1.7532;-4.3474,-5.6836,.8748;4.2764,-2.1969,-.176;4.1355,-3.2969,-1.0343;3.4945,-4.4565,-.6144;2.9986,-4.5106,.6827;3.1454,-3.4494,1.5711;3.7777,-2.2927,1.133;4.4912,-3.2275,-2.0655;3.355,-5.2994,-1.292;2.263,-5.6992,1.1159;2.7396,-3.529,2.5807;3.8703,-1.4434,1.8112;-.4887,4.0201,.0584;-1.8601,3.8105,-.0002;-2.4046,3.2972,-1.1723;-1.6194,3.0178,-2.288;-.2483,3.2253,-2.2099;-.0386,4.379,.9871;-2.5045,4.0172,.8548;-3.841,3.0134,-1.2245;-2.084,2.6289,-3.1949;.3812,2.9822,-3.0673;2.1699,-5.9087,2.3044;1.7698,-6.4037,.254;-4.3307,2.7517,-2.302;-4.4624,3.0379,-.1785;6.6157,.1627,-2.0346;5.941,1.4101,-1.8939;7.7934,.0906,-2.8289;8.2693,1.1978,-3.4863;8.3079,-.8712,-2.9171;9.1726,1.1301,-4.0989;6.4423,2.5306,-2.6139;7.5746,2.4273,-3.3858;5.9117,3.4832,-2.5558;7.9385,3.3017,-3.9327;4.5795,3.9051,-.2534;3.7629,5.0569,-.0559;5.9307,3.9567,.1914;6.4511,5.101,.7466;6.5594,3.0691,.093;7.4924,5.1144,1.0814;4.3341,6.2311,.5081;5.6508,6.2592,.8954;3.6982,7.1115,.6385;6.0788,7.1659,1.3316;-2.3477,-3.9456,-2.8709;-2.5303,-4.9797,-2.5408;-3.2194,-3.6245,-3.4722;-1.4716,-3.9429,-3.5387;-1.6945,-1.6065,-2.1005;-2.4308,-1.1359,-2.7772;-1.5316,-.9407,-1.2383;-.7446,-1.6508,-2.6567;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662929679647</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000510155290 0.000102228350 0.017647958897 0.005363404646</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057141744 -0.000027921 0.000059808 0.000160900 0.000241446 0.000336804 0.000406505 0.000527724 0.000705247 0.000779287 0.000912724 0.001012590 0.001185483 0.001264457 0.001378700 0.001480049 0.001586504 0.001705775 0.001765849 0.002059233 0.002315646 0.002598308 0.002799864 0.003055439 0.003230848 0.003673288 0.003907296 0.004491366 0.004719254 0.004864724 0.005157794 0.005320470 0.005994993 0.006347076 0.006506880 0.006731745 0.006951677 0.007393093 0.008188409 0.008625836 0.008809376 0.009376548 0.009759678 0.009900576 0.010965826 0.011219690 0.011899525 0.012641023 0.013343545 0.013664153 0.013982360 0.014641692 0.014884254 0.015425895 0.015880864 0.016001272 0.016813684 0.018652345 0.019264998 0.019445451 0.020208764 0.020546940 0.021545805 0.021761222 0.022467830 0.022816143 0.023577398 0.023773926 0.024600782 0.025908937 0.026523030 0.027098880 0.027209933 0.027723486 0.028505696 0.028748646 0.029647776 0.031280672 0.031583103 0.034273356 0.034830931 0.036042015 0.039102941 0.039691816 0.042014074 0.045481964 0.046116726 0.046705954 0.048867991 0.049702121 0.050097857 0.050838785 0.051555128 0.052228509 0.052295804 0.052421761 0.053040354 0.053651788 0.055014873 0.056116194 0.056454026 0.056702546 0.056932161 0.057052313 0.057826806 0.058657062 0.059297249 0.059837164 0.061349447 0.062174227 0.062991112 0.064351920 0.064637490 0.065141860 0.066072601 0.067620329 0.067860866 0.069033136 0.070401593 0.071154756 0.072118163 0.072534408 0.072962933 0.073214181 0.078666713 0.080271325 0.081787092 0.082500279 0.083486651 0.084641747 0.089160968 0.089512698 0.089839656 0.091347999 0.093348478 0.094589876 0.095510502 0.096303492 0.096879504 0.098608207 0.100192145 0.100709394 0.102825143 0.104012453 0.104796395 0.107011725 0.109698413 0.111114980 0.112538910 0.112978655 0.114037419 0.115040116 0.117025869 0.117454669 0.118634026 0.119195483 0.120696830 0.122244778 0.125094892 0.125885181 0.128767614 0.129090043 0.131120493 0.133898652 0.137053590 0.137976517 0.138635808 0.139814517 0.140402866 0.143423862 0.144551471 0.145925265 0.146820781 0.152005557 0.153599472 0.154111892 0.159402555 0.160837268 0.168583034 0.171486732 0.176691621 0.179240284 0.181687709 0.184541817 0.189225472 0.190785692 0.192005801 0.201394188 0.202262394 0.206376870 0.206973030 0.207277343 0.212512032 0.213007512 0.215660441 0.216998508 0.220422624 0.220939670 0.224631283 0.225202557 0.227210068 0.231920919 0.234638432 0.236282769 0.238614427 0.246330611 0.248453581 0.252817988 0.256624831 0.257251082 0.258364569 0.262590088 0.271610398 0.282937334 0.292081232 0.300172109 0.300283819 0.301139793 0.307220771 0.307815392 0.309865719 0.320043263 0.321427524 0.326514971 0.330968184 0.336695410 0.347823609 0.352057942 0.355654767 0.360881830 0.362172402 0.364160743 0.384578651 0.408040349 0.414438106 0.430331033 0.431531022 0.435505286 0.451176720 0.465197755 0.475730977 0.479040113 0.480529164 0.486937920 0.498908251 0.503900157 0.515266715 0.518101716 0.544113340 0.566952503 0.567794121 0.586942779 0.591770037 0.606125398 0.644315543 0.645871283 0.668166150 0.675661449 0.687432656 0.703618527 0.704193046 0.704447414 0.711836642 0.717404064 0.734395202 0.738046257 0.739800245 0.747016513 0.750947151 0.771639152 0.776013674 0.809434157 0.821903160 0.824337778 0.828959973 0.834357412 0.848411918 0.849621832 0.851451543 0.854833601 0.863557594 0.867480832 0.876021292 0.887600296 0.891433751 0.892388963 0.893812515 0.902144773 0.910663536 0.917988595 0.922685635 0.924571899 0.932051569 0.936412488 0.956208911 0.962665545 0.965412595 0.970140080 0.977134182 0.982594131 0.998846670 1.013132109 1.016331283 1.022028040 1.040364624 1.055664916 1.071579866 1.073186567 1.080738716 1.087636138 1.108724157 1.110449672 1.118330395 1.119323188 1.122645353 1.124054592 1.141961447 1.150184546 1.161786294 1.170210870 1.177613825 1.189104620 1.200843880 1.222231138 1.234296723 1.258318332 1.296583130 1.299949628 1.314816168 1.326484009 1.327511836 1.330402067 1.331497711 1.334852277 1.342661344 1.349318149 1.369271728 1.380025065 1.381354330 1.382012557 1.429499442 1.512507373 1.558003494 1.684874120 1.922799224</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">318</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91406822" y3="-0.95519142" z3="-0.68752796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59693598" y3="-1.95083799" z3="-1.55529463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07948326" y3="-0.99651008" z3="-1.41737729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77114306" y3="1.47706967" z3="-1.06940909">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28317497" y3="0.31060681" z3="-0.50576438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65277702" y3="2.73969063" z3="-1.15428408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00260196" y3="2.73553995" z3="-0.84981365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.379092" y3="4.99527241" z3="-0.37312617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80702477" y3="3.8547916" z3="-0.88559992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75386979" y3="5.8712687" z3="-0.17333207">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08573133" y3="1.61530882" z3="-1.6805314">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1235347" y3="0.35784881" z3="0.21281763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70905977" y3="0.38590953" z3="-0.64363442">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60561231" y3="0.7348952" z3="0.28584025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65771981" y3="-0.85375214" z3="-1.50861252">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09440675" y3="-2.47319271" z3="-1.32371785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0248189" y3="-5.50045358" z3="-6.26936984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75791199" y3="-5.06397242" z3="-5.30266564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05760971" y3="-3.91821743" z3="-2.84834892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72381206" y3="-3.68322498" z3="-5.15852699">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47069861" y3="-5.8884103" z3="-4.21190581">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13500845" y3="-5.30942194" z3="-2.99456432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38277361" y3="-3.07856102" z3="-3.93811049">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95485894" y3="-3.01761903" z3="-5.9938489">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52173608" y3="-6.97629563" z3="-4.30312558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94865317" y3="-5.94078142" z3="-2.12162796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65457479" y3="-3.36771477" z3="-1.60480419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34323392" y3="-3.85102555" z3="-0.856553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68499026" y3="-4.85461614" z3="-1.1228548">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37768323" y3="-3.5457018" z3="0.59117958">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40600836" y3="-3.0639032" z3="3.3486645">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.6807579" y3="-4.57908266" z3="1.48622642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.1088049" y3="-2.26674546" z3="1.0881523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11964883" y3="-2.02810581" z3="2.45810507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6862961" y3="-4.34025654" z3="2.85936237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87051026" y3="-5.58832073" z3="1.10922507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09644974" y3="-1.42808833" z3="0.4219777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10497281" y3="-1.01887239" z3="2.81374203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.8886012" y3="-5.16339052" z3="3.54976685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.4036834" y3="-2.88035404" z3="4.42709187">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33514558" y3="-1.74275441" z3="-3.91150351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46629515" y3="-1.33448045" z3="-3.00993209">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33626491" y3="3.71578567" z3="-1.04115952">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13281831" y3="-2.99011228" z3="-1.70988617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91782702" y3="-3.16347007" z3="-0.56591081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10993146" y3="-2.28503533" z3="0.36297301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83615289" y3="-0.71810256" z3="0.61459339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69385845" y3="-0.24671364" z3="-0.97375622">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52776242" y3="0.45383206" z3="1.20831081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08365965" y3="-1.05545148" z3="1.96765595">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40011875" y3="-4.37415499" z3="-0.32508254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.1145749" y3="-4.60942229" z3="0.87885078">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99357387" y3="0.05857755" z3="-1.76669605">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36247284" y3="0.61277504" z3="-0.78532349">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31115687" y3="-1.07824711" z3="-1.35896117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.635879" y3="0.55387665" z3="0.56305265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17069436" y3="0.14743205" z3="2.20695524">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99367565" y3="1.45169964" z3="1.30613663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54623187" y3="-0.10702562" z3="2.29588695">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89497839" y3="-1.72325218" z3="1.62850683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59795339" y3="-1.51571737" z3="2.84628443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0514429" y3="-4.02871365" z3="0.89487432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50192941" y3="-4.35069137" z3="1.7562488">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34384408" y3="-5.68347696" z3="0.87808916">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27688298" y3="-2.19722837" z3="-0.17721876">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13557775" y3="-3.29646478" z3="-1.03662555">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49403113" y3="-4.45589614" z3="-0.61798242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99878266" y3="-4.51116569" z3="0.67933427">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14586936" y3="-3.45095141" z3="1.56885487">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77815228" y3="-2.29393853" z3="1.13166055">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49128439" y3="-3.22606252" z3="-2.06781693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35341544" y3="-5.2975208" z3="-1.29666301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26388215" y3="-5.7004518" z3="1.11200825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74024293" y3="-3.53146879" z3="2.57843013">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87048799" y3="-1.44481345" z3="1.81044683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49063983" y3="4.02048808" z3="0.04847279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.8618115" y3="3.80978539" z3="-0.01218939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40376756" y3="3.29354717" z3="-1.18420678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61619477" y3="3.01243479" z3="-2.29784797">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24529351" y3="3.22110273" z3="-2.21753274">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04248587" y3="4.38140136" z3="0.97742874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50803765" y3="4.01788167" z3="0.84114777">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83974348" y3="3.00818336" z3="-1.23812666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07867909" y3="2.62106913" z3="-3.20473936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38587799" y3="2.97693618" z3="-3.07372863">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17214307" y3="-5.91121801" z3="2.30038046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77007439" y3="-6.40421108" z3="0.24986571">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3267429" y3="2.74048943" z3="-2.31526194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46355304" y3="3.03747159" z3="-0.193816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61993894" y3="0.16397044" z3="-2.02921851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94481243" y3="1.41115357" z3="-1.88922754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79982638" y3="0.09281287" z3="-2.82027381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27760252" y3="1.20069342" z3="-3.47514948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31468032" y3="-0.8688619" z3="-2.90796918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18270068" y3="1.13374557" z3="-4.08514783">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44799958" y3="2.53238821" z3="-2.60689408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5825496" y3="2.42996986" z3="-3.37552098">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91707071" y3="3.48473154" z3="-2.54962299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94797874" y3="3.30497005" z3="-3.92046385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57818324" y3="3.90436138" z3="-0.25070714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76069932" y3="5.05584202" z3="-0.05459472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.927808" y3="3.95574241" z3="0.19872365">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44627534" y3="5.09956893" z3="0.75673738">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55627792" y3="3.06863271" z3="0.10397022">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48584593" y3="5.11299216" z3="1.09587216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32977554" y3="6.22943463" z3="0.51290018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64531751" y3="6.25738655" z3="0.90415493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69277451" y3="7.10991138" z3="0.64475273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07150651" y3="7.16362748" z3="1.34351357">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35084874" y3="-3.94214747" z3="-2.86915216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53158813" y3="-4.9767507" z3="-2.53964753">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22433488" y3="-3.62140857" z3="-3.46780951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47647669" y3="-3.93767585" z3="-3.53916709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69589295" y3="-1.60352988" z3="-2.09849039">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43238835" y3="-1.13249664" z3="-2.7743385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53215306" y3="-0.9383166" z3="-1.23624339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.7460983" y3="-1.64821958" z3="-2.65532681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9141,-.9552,-.6875;6.5969,-1.9508,-1.5553;6.0795,-.9965,-1.4174;4.7711,1.4771,-1.0694;4.2832,.3106,-.5058;2.6528,2.7397,-1.1543;4.0026,2.7355,-.8498;2.3791,4.9953,-.3731;1.807,3.8548,-.8856;1.7539,5.8713,-.1733;2.0857,1.6153,-1.6805;3.1235,.3578,.2128;1.7091,.3859,-.6436;.6056,.7349,.2858;1.6577,-.8538,-1.5086;1.0944,-2.4732,-1.3237;2.0248,-5.5005,-6.2694;1.7579,-5.064,-5.3027;1.0576,-3.9182,-2.8483;1.7238,-3.6832,-5.1585;1.4707,-5.8884,-4.2119;1.135,-5.3094,-2.9946;1.3828,-3.0786,-3.9381;1.9549,-3.0176,-5.9938;1.5217,-6.9763,-4.3031;.9487,-5.9408,-2.1216;.6546,-3.3677,-1.6048;-.3432,-3.851,-.8566;-.685,-4.8546,-1.1229;-.3777,-3.5457,.5912;-.406,-3.0639,3.3487;-.6808,-4.5791,1.4862;-.1088,-2.2667,1.0882;-.1196,-2.0281,2.4581;-.6863,-4.3403,2.8594;-.8705,-5.5883,1.1092;.0964,-1.4281,.422;.105,-1.0189,2.8137;-.8886,-5.1634,3.5498;-.4037,-2.8804,4.4271;1.3351,-1.7428,-3.9115;1.4663,-1.3345,-3.0099;.3363,3.7158,-1.0412;-2.1328,-2.9901,-1.7099;-2.9178,-3.1635,-.5659;-3.1099,-2.285,.363;-3.8362,-.7181,.6146;-4.6939,-.2467,-.9738;-2.5278,.4538,1.2083;-5.0837,-1.0555,1.9677;-3.4001,-4.3742,-.3251;-4.1146,-4.6094,.8789;-3.9936,.0586,-1.7667;-5.3625,.6128,-.7853;-5.3112,-1.0782,-1.359;-1.6359,.5539,.5631;-2.1707,.1474,2.207;-2.9937,1.4517,1.3061;-5.5462,-.107,2.2959;-5.895,-1.7233,1.6285;-4.598,-1.5157,2.8463;-5.0514,-4.0287,.8949;-3.5019,-4.3507,1.7562;-4.3438,-5.6835,.8781;4.2769,-2.1972,-.1772;4.1356,-3.2965,-1.0366;3.494,-4.4559,-.618;2.9988,-4.5112,.6793;3.1459,-3.451,1.5689;3.7782,-2.2939,1.1317;4.4913,-3.2261,-2.0678;3.3534,-5.2975,-1.2967;2.2639,-5.7005,1.112;2.7402,-3.5315,2.5784;3.8705,-1.4448,1.8104;-.4906,4.0205,.0485;-1.8618,3.8098,-.0122;-2.4038,3.2935,-1.1842;-1.6162,3.0124,-2.2978;-.2453,3.2211,-2.2175;-.0425,4.3814,.9774;-2.508,4.0179,.8411;-3.8397,3.0082,-1.2381;-2.0787,2.6211,-3.2047;.3859,2.9769,-3.0737;2.1721,-5.9112,2.3004;1.7701,-6.4042,.2499;-4.3267,2.7405,-2.3153;-4.4636,3.0375,-.1938;6.6199,.164,-2.0292;5.9448,1.4112,-1.8892;7.7998,.0928,-2.8203;8.2776,1.2007,-3.4751;8.3147,-.8689,-2.908;9.1827,1.1337,-4.0851;6.448,2.5324,-2.6069;7.5825,2.43,-3.3755;5.9171,3.4847,-2.5496;7.948,3.305,-3.9205;4.5782,3.9044,-.2507;3.7607,5.0558,-.0546;5.9278,3.9557,.1987;6.4463,5.0996,.7567;6.5563,3.0686,.104;7.4858,5.113,1.0959;4.3298,6.2294,.5129;5.6453,6.2574,.9042;3.6928,7.1099,.6448;6.0715,7.1636,1.3435;-2.3508,-3.9421,-2.8692;-2.5316,-4.9768,-2.5396;-3.2243,-3.6214,-3.4678;-1.4765,-3.9377,-3.5392;-1.6959,-1.6035,-2.0985;-2.4324,-1.1325,-2.7743;-1.5322,-.9383,-1.2362;-.7461,-1.6482,-2.6553;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931439547</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000332124444 0.000064297339 0.023930746288 0.005325399324</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057139967 -0.000004586 0.000046396 0.000161599 0.000223689 0.000320877 0.000407162 0.000518029 0.000705320 0.000773000 0.000911916 0.001011132 0.001177201 0.001263288 0.001378184 0.001475285 0.001567675 0.001704684 0.001765826 0.002057502 0.002310636 0.002599127 0.002795450 0.003053140 0.003192295 0.003671528 0.003907419 0.004482438 0.004697212 0.004858267 0.005156765 0.005302430 0.005995407 0.006339817 0.006498285 0.006727833 0.006948547 0.007393127 0.008188273 0.008621330 0.008808623 0.009373969 0.009759055 0.009900410 0.010965101 0.011219629 0.011896010 0.012638866 0.013318465 0.013633100 0.013977931 0.014641198 0.014880281 0.015425930 0.015871206 0.015991999 0.016815035 0.018651534 0.019254374 0.019444662 0.020200596 0.020541413 0.021541079 0.021750669 0.022467072 0.022815191 0.023576889 0.023761244 0.024602130 0.025908911 0.026465372 0.027097399 0.027187700 0.027716659 0.028415246 0.028759958 0.029618688 0.031295025 0.031583169 0.034274881 0.034834030 0.036043986 0.039102980 0.039691275 0.042014716 0.045481885 0.046116973 0.046699223 0.048865760 0.049702136 0.050098730 0.050838551 0.051555147 0.052228303 0.052295811 0.052421768 0.053040320 0.053651788 0.055014339 0.056115889 0.056453580 0.056694141 0.056916571 0.057049870 0.057825133 0.058655969 0.059297159 0.059837969 0.061348801 0.062175310 0.062989568 0.064351054 0.064641860 0.065140687 0.066072875 0.067617664 0.067853110 0.069033527 0.070299128 0.070978533 0.072082736 0.072523488 0.072956998 0.073214954 0.078661258 0.080229711 0.081744968 0.082471870 0.083481653 0.084620288 0.089159273 0.089513439 0.089838739 0.091348178 0.093348073 0.094589574 0.095510476 0.096301874 0.096879726 0.098608881 0.100188423 0.100709548 0.102823493 0.104010971 0.104797135 0.107012403 0.109699754 0.111114751 0.112540260 0.112976911 0.114037127 0.115040309 0.117025226 0.117452961 0.118630771 0.119191439 0.120696272 0.122243987 0.125091993 0.125884081 0.128767811 0.129092414 0.131121039 0.133899915 0.137054035 0.137980922 0.138631786 0.139813082 0.140400284 0.143423160 0.144533264 0.145921194 0.146819902 0.152001848 0.153597890 0.154105742 0.159329948 0.160828893 0.168581748 0.171486677 0.176690697 0.179241743 0.181687551 0.184541823 0.189224511 0.190786973 0.192000529 0.201393312 0.202260855 0.206376991 0.206972657 0.207277487 0.212511045 0.213009896 0.215659259 0.216992898 0.220417500 0.220934829 0.224624106 0.225203817 0.227210185 0.231920842 0.234638384 0.236283474 0.238614856 0.246328531 0.248440249 0.252815208 0.256624592 0.257251275 0.258364029 0.262589916 0.271610161 0.282938222 0.292081498 0.300172389 0.300280335 0.301139691 0.307221135 0.307815420 0.309865717 0.320035735 0.321428492 0.326514978 0.330959408 0.336695254 0.347823356 0.352057484 0.355654530 0.360874588 0.362172349 0.364160399 0.384574751 0.408045544 0.414416448 0.430325707 0.431463287 0.435503619 0.451175775 0.465203385 0.475732013 0.479041583 0.480528803 0.486929152 0.498908199 0.503894187 0.515254161 0.518098093 0.544105984 0.566951227 0.567795164 0.586942981 0.591743349 0.606124836 0.644301675 0.645869168 0.668166056 0.675657696 0.687432775 0.703483489 0.704193693 0.704442329 0.711837684 0.717403425 0.734394673 0.738046157 0.739799474 0.746964650 0.750946775 0.771639097 0.776013941 0.809435268 0.821903073 0.824337518 0.828959326 0.834356326 0.848411506 0.849622031 0.851449199 0.854831200 0.863557093 0.867480897 0.876020296 0.887599013 0.891405626 0.892370791 0.893804716 0.902143482 0.910662775 0.917983540 0.922661901 0.924571450 0.932051535 0.936410949 0.956184920 0.962628100 0.965409659 0.970137319 0.977023761 0.982590145 0.998847044 1.013126439 1.016330340 1.022028181 1.040365642 1.055665629 1.071579263 1.073185612 1.080738928 1.087636767 1.108725554 1.110449808 1.118330527 1.119323260 1.122645322 1.124054450 1.141961520 1.150184464 1.161786333 1.170210843 1.177613848 1.189105092 1.200844015 1.222231165 1.234296303 1.258318334 1.296582811 1.299944234 1.314815716 1.326481831 1.327488208 1.330396891 1.331497221 1.334852295 1.342659390 1.349317380 1.369271866 1.380025166 1.381354277 1.382013072 1.429467511 1.512199432 1.558002888 1.684874133 1.922746416</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">319</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91677642" y3="-0.9544078" z3="-0.68628454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60135199" y3="-1.95012152" z3="-1.55071057">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08363612" y3="-0.99577418" z3="-1.41378757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77409731" y3="1.47778244" z3="-1.06863419">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.2852878" y3="0.31127097" z3="-0.50584077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65522126" y3="2.73909423" z3="-1.15844301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00438282" y3="2.73594041" z3="-0.85106008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37824165" y3="4.99450413" z3="-0.37799249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80807278" y3="3.85350667" z3="-0.89147436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7520694" y3="5.86989646" z3="-0.18007882">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.09008687" y3="1.61424132" z3="-1.68572012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12413186" y3="0.35813275" z3="0.21035541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71144216" y3="0.38518346" z3="-0.64919961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60582826" y3="0.73430195" z3="0.27774702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66254101" y3="-0.8549279" z3="-1.51373649">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09433666" y3="-2.47251421" z3="-1.32689173">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.01602037" y3="-5.5037736" z3="-6.27191665">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75066736" y3="-5.06630257" z3="-5.30520663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05430566" y3="-3.91812594" z3="-2.85091264">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.71719807" y3="-3.68535868" z3="-5.16225802">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46483437" y3="-5.88967228" z3="-4.21330417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13107591" y3="-5.30948007" z3="-2.99596036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.37810481" y3="-3.07952062" z3="-3.94187347">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.94721788" y3="-3.02065374" z3="-5.99859051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51542326" y3="-6.97767118" z3="-4.30362336">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94568382" y3="-5.93993165" z3="-2.12216029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65281569" y3="-3.36647917" z3="-1.60735735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34520546" y3="-3.84853959" z3="-0.85847974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68840022" y3="-4.85171301" z3="-1.1247977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37833244" y3="-3.54376846" z3="0.58945398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40702899" y3="-3.06322933" z3="3.34713648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68374443" y3="-4.57700761" z3="1.48397716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10683058" y3="-2.26572706" z3="1.08712196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11804095" y3="-2.02766885" z3="2.45712889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.68944098" y3="-4.33892479" z3="2.85718325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87521877" y3="-5.58585926" z3="1.10651404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10003274" y3="-1.42689198" z3="0.42144353">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10841196" y3="-1.01903759" z3="2.81337435">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89377259" y3="-5.1619814" z3="3.54706794">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40503086" y3="-2.88003209" z3="4.42560674">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33056621" y3="-1.7436308" z3="-3.9159856">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46526244" y3="-1.33529694" z3="-3.0150795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33771273" y3="3.71296557" z3="-1.04874526">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13374238" y3="-2.98426658" z3="-1.70912688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91878632" y3="-3.16175648" z3="-0.56580919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10982358" y3="-2.28722492" z3="0.36698334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83555989" y3="-0.72102144" z3="0.62395174">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70364525" y3="-0.25202279" z3="-0.95949656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52612859" y3="0.45434575" z3="1.20955808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07356528" y3="-1.060664" z3="1.98580029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40195556" y3="-4.37305913" z3="-0.33002244">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11811259" y3="-4.61242149" z3="0.87211359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00781694" y3="0.04868079" z3="-1.75841394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.3684678" y3="0.61009789" z3="-0.76928934">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32597409" y3="-1.08327452" z3="-1.33781373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63644467" y3="0.55403059" z3="0.56097403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16500035" y3="0.15148663" z3="2.20792742">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99359397" y3="1.45193376" z3="1.30605088">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53557526" y3="-0.11309431" z3="2.31732593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88611339" y3="-1.73005309" z3="1.65243757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58061393" y3="-1.52005351" z3="2.86092331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0547868" y3="-4.03145668" z3="0.88867832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50667682" y3="-4.35653636" z3="1.75134627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34781135" y3="-5.68619089" z3="0.86701273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27832408" y3="-2.19610344" z3="-0.17684901">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13520376" y3="-3.2944064" z3="-1.0369652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49242234" y3="-4.45347626" z3="-0.61872661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99771459" y3="-4.50901713" z3="0.67879878">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14642634" y3="-3.44951433" z3="1.56889439">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7799456" y3="-2.29297914" z3="1.13209082">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49073786" y3="-3.22365399" z3="-2.06818162">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3507579" y3="-5.29488393" z3="-1.29772683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26162119" y3="-5.69771766" z3="1.11115829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74106951" y3="-3.53021927" z3="2.57855182">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87386019" y3="-1.44454019" z3="1.81131337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49038755" y3="4.01842392" z3="0.03986185">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86122314" y3="3.80601961" z3="-0.02153627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.401631" y3="3.28662492" z3="-1.19283138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61293205" y3="3.00463505" z3="-2.30548305">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24243837" y3="3.21572833" z3="-2.22482664">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04345635" y3="4.3813768" z3="0.96858771">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50832462" y3="4.01486622" z3="0.83097593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83722009" y3="2.99918666" z3="-1.24704849">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07426345" y3="2.6108065" z3="-3.21191981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38954343" y3="2.97101015" z3="-3.08002029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16925061" y3="-5.90840851" z3="2.2994727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76752883" y3="-6.401039" z3="0.24882153">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32250357" y3="2.7244235" z3="-2.32328192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46248497" y3="3.03415775" z3="-0.20369194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62530899" y3="0.1648391" z3="-2.02436081">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94968765" y3="1.41197249" z3="-1.88577543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80704847" y3="0.09390386" z3="-2.81271983">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28623566" y3="1.2019145" z3="-3.46635597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32227871" y3="-0.8676973" z3="-2.89930657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19279118" y3="1.13511411" z3="-4.07426569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45448235" y3="2.53339326" z3="-2.60202793">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.59084525" y3="2.43116681" z3="-3.3680832">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92341212" y3="3.48579539" z3="-2.54558362">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95749583" y3="3.30630794" z3="-3.91198242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.5777268" y3="3.90522333" z3="-0.2506986">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75901267" y3="5.05611998" z3="-0.05642469">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92648413" y3="3.95762945" z3="0.20138397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44284933" y3="5.10178833" z3="0.76067867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55633306" y3="3.07075509" z3="0.10591391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4821356" y3="5.11586539" z3="1.1013196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32608571" y3="6.23016214" z3="0.51204773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64063429" y3="6.25906072" z3="0.90643527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68848861" y3="7.10995057" z3="0.64071663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06535353" y3="7.16567606" z3="1.34625391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35210447" y3="-3.93173807" z3="-2.8720563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53194804" y3="-4.96780277" z3="-2.54655985">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22612021" y3="-3.60902945" z3="-3.46888476">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.4781623" y3="-3.92434396" z3="-3.54259197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69642805" y3="-1.59643033" z3="-2.09260455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43312943" y3="-1.12276838" z3="-2.76661496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53200815" y3="-0.93402806" z3="-1.22818367">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74726362" y3="-1.6397096" z3="-2.65026284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9168,-.9544,-.6863;6.6014,-1.9501,-1.5507;6.0836,-.9958,-1.4138;4.7741,1.4778,-1.0686;4.2853,.3113,-.5058;2.6552,2.7391,-1.1584;4.0044,2.7359,-.8511;2.3782,4.9945,-.378;1.8081,3.8535,-.8915;1.7521,5.8699,-.1801;2.0901,1.6142,-1.6857;3.1241,.3581,.2104;1.7114,.3852,-.6492;.6058,.7343,.2777;1.6625,-.8549,-1.5137;1.0943,-2.4725,-1.3269;2.016,-5.5038,-6.2719;1.7507,-5.0663,-5.3052;1.0543,-3.9181,-2.8509;1.7172,-3.6854,-5.1623;1.4648,-5.8897,-4.2133;1.1311,-5.3095,-2.996;1.3781,-3.0795,-3.9419;1.9472,-3.0207,-5.9986;1.5154,-6.9777,-4.3036;.9457,-5.9399,-2.1222;.6528,-3.3665,-1.6074;-.3452,-3.8485,-.8585;-.6884,-4.8517,-1.1248;-.3783,-3.5438,.5895;-.407,-3.0632,3.3471;-.6837,-4.577,1.484;-.1068,-2.2657,1.0871;-.118,-2.0277,2.4571;-.6894,-4.3389,2.8572;-.8752,-5.5859,1.1065;.1,-1.4269,.4214;.1084,-1.019,2.8134;-.8938,-5.162,3.5471;-.405,-2.88,4.4256;1.3306,-1.7436,-3.916;1.4653,-1.3353,-3.0151;.3377,3.713,-1.0487;-2.1337,-2.9843,-1.7091;-2.9188,-3.1618,-.5658;-3.1098,-2.2872,.367;-3.8356,-.721,.624;-4.7036,-.252,-.9595;-2.5261,.4543,1.2096;-5.0736,-1.0607,1.9858;-3.402,-4.3731,-.33;-4.1181,-4.6124,.8721;-4.0078,.0487,-1.7584;-5.3685,.6101,-.7693;-5.326,-1.0833,-1.3378;-1.6364,.554,.561;-2.165,.1515,2.2079;-2.9936,1.4519,1.3061;-5.5356,-.1131,2.3173;-5.8861,-1.7301,1.6524;-4.5806,-1.5201,2.8609;-5.0548,-4.0315,.8887;-3.5067,-4.3565,1.7513;-4.3478,-5.6862,.867;4.2783,-2.1961,-.1768;4.1352,-3.2944,-1.037;3.4924,-4.4535,-.6187;2.9977,-4.509,.6788;3.1464,-3.4495,1.5689;3.7799,-2.293,1.1321;4.4907,-3.2237,-2.0682;3.3508,-5.2949,-1.2977;2.2616,-5.6977,1.1112;2.7411,-3.5302,2.5786;3.8739,-1.4445,1.8113;-.4904,4.0184,.0399;-1.8612,3.806,-.0215;-2.4016,3.2866,-1.1928;-1.6129,3.0046,-2.3055;-.2424,3.2157,-2.2248;-.0435,4.3814,.9686;-2.5083,4.0149,.831;-3.8372,2.9992,-1.247;-2.0743,2.6108,-3.2119;.3895,2.971,-3.08;2.1693,-5.9084,2.2995;1.7675,-6.401,.2488;-4.3225,2.7244,-2.3233;-4.4625,3.0342,-.2037;6.6253,.1648,-2.0244;5.9497,1.412,-1.8858;7.807,.0939,-2.8127;8.2862,1.2019,-3.4664;8.3223,-.8677,-2.8993;9.1928,1.1351,-4.0743;6.4545,2.5334,-2.602;7.5908,2.4312,-3.3681;5.9234,3.4858,-2.5456;7.9575,3.3063,-3.912;4.5777,3.9052,-.2507;3.759,5.0561,-.0564;5.9265,3.9576,.2014;6.4428,5.1018,.7607;6.5563,3.0708,.1059;7.4821,5.1159,1.1013;4.3261,6.2302,.512;5.6406,6.2591,.9064;3.6885,7.11,.6407;6.0654,7.1657,1.3463;-2.3521,-3.9317,-2.8721;-2.5319,-4.9678,-2.5466;-3.2261,-3.609,-3.4689;-1.4782,-3.9243,-3.5426;-1.6964,-1.5964,-2.0926;-2.4331,-1.1228,-2.7666;-1.532,-.934,-1.2282;-.7473,-1.6397,-2.6503;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931952606</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000306001291 0.000060805513 0.021666167532 0.005364269592</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057139538 0.000016801 0.000035178 0.000165296 0.000234583 0.000313364 0.000403492 0.000517512 0.000704893 0.000774826 0.000908737 0.001009919 0.001176313 0.001265158 0.001375528 0.001473332 0.001563558 0.001702945 0.001766560 0.002054851 0.002309961 0.002599486 0.002793246 0.003054569 0.003179609 0.003670616 0.003906627 0.004485965 0.004694053 0.004853641 0.005154583 0.005288188 0.005994226 0.006332732 0.006498468 0.006719816 0.006942902 0.007391836 0.008185259 0.008615649 0.008806343 0.009363553 0.009752797 0.009900209 0.010964922 0.011219425 0.011896353 0.012638574 0.013300578 0.013625464 0.013976726 0.014643761 0.014878368 0.015425695 0.015867354 0.015985999 0.016817444 0.018651507 0.019247104 0.019445115 0.020201870 0.020540735 0.021540756 0.021749094 0.022466778 0.022814959 0.023578036 0.023760724 0.024603282 0.025908475 0.026429280 0.027091296 0.027176753 0.027726436 0.028366107 0.028773692 0.029629561 0.031311759 0.031583331 0.034275439 0.034836191 0.036045837 0.039103545 0.039695552 0.042015771 0.045482799 0.046113935 0.046686870 0.048864086 0.049702282 0.050097878 0.050837932 0.051555327 0.052229250 0.052296067 0.052421890 0.053041409 0.053652268 0.055014793 0.056115080 0.056452103 0.056681102 0.056896507 0.057049495 0.057826374 0.058657790 0.059298607 0.059839621 0.061347440 0.062175689 0.062990365 0.064351773 0.064646482 0.065141748 0.066072496 0.067621251 0.067851049 0.069033326 0.070259629 0.070941954 0.072071741 0.072522395 0.072954003 0.073221447 0.078658720 0.080217947 0.081732659 0.082477304 0.083479700 0.084623674 0.089163814 0.089517706 0.089837787 0.091348549 0.093348379 0.094589897 0.095511059 0.096301311 0.096880133 0.098610048 0.100185763 0.100709675 0.102823678 0.104010532 0.104801843 0.107016290 0.109709130 0.111115782 0.112546489 0.112981753 0.114037641 0.115043769 0.117024676 0.117454169 0.118630922 0.119191472 0.120696267 0.122245170 0.125091441 0.125884618 0.128769832 0.129094439 0.131124998 0.133900122 0.137064083 0.137980499 0.138634878 0.139815946 0.140402200 0.143422481 0.144530043 0.145922996 0.146820165 0.152001748 0.153599614 0.154098224 0.159305948 0.160827440 0.168581176 0.171487628 0.176702687 0.179246621 0.181689169 0.184542111 0.189225736 0.190796895 0.192002201 0.201394239 0.202262035 0.206378208 0.206972738 0.207277774 0.212511249 0.213026859 0.215660317 0.216991807 0.220413542 0.220932257 0.224624081 0.225207336 0.227210500 0.231921424 0.234639062 0.236286515 0.238615844 0.246332567 0.248442555 0.252819255 0.256625252 0.257251957 0.258364333 0.262590122 0.271610735 0.282939133 0.292082672 0.300172788 0.300282312 0.301140337 0.307222805 0.307815895 0.309865860 0.320038061 0.321430684 0.326515785 0.330962712 0.336696060 0.347824524 0.352058067 0.355654510 0.360876078 0.362172954 0.364160468 0.384576002 0.408073385 0.414406502 0.430324970 0.431438729 0.435506263 0.451176970 0.465217171 0.475731664 0.479044246 0.480528934 0.486936425 0.498908208 0.503893398 0.515256310 0.518102257 0.544112182 0.566952090 0.567798858 0.586946460 0.591742618 0.606127370 0.644304591 0.645875530 0.668167859 0.675659602 0.687433712 0.703473329 0.704194780 0.704444131 0.711850449 0.717405894 0.734395773 0.738046291 0.739802855 0.746947146 0.750948023 0.771639360 0.776014811 0.809438306 0.821903889 0.824341065 0.828959855 0.834357652 0.848414465 0.849625476 0.851450462 0.854839070 0.863558142 0.867481079 0.876020847 0.887598505 0.891401478 0.892365109 0.893805425 0.902143756 0.910665294 0.917979739 0.922661073 0.924571472 0.932051801 0.936420561 0.956184491 0.962604914 0.965411031 0.970137893 0.977012200 0.982590389 0.998851346 1.013125608 1.016330505 1.022029384 1.040368314 1.055677421 1.071590892 1.073187306 1.080753244 1.087639943 1.108735175 1.110450730 1.118330655 1.119323886 1.122645858 1.124056115 1.141963069 1.150189036 1.161786497 1.170210971 1.177617327 1.189109515 1.200845159 1.222231765 1.234297015 1.258319644 1.296585153 1.299963047 1.314817061 1.326481573 1.327486152 1.330396171 1.331498411 1.334852572 1.342662170 1.349317213 1.369274882 1.380025335 1.381354523 1.382020065 1.429465368 1.512181980 1.558002923 1.684874320 1.922730450</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">320</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91977917" y3="-0.95375984" z3="-0.68170378">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60423825" y3="-1.94979341" z3="-1.54586214">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08616266" y3="-0.99551345" z3="-1.40987951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77508581" y3="1.47775506" z3="-1.06808339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28788808" y3="0.31190779" z3="-0.50246921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65492572" y3="2.73730019" z3="-1.15740351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00467776" y3="2.73580817" z3="-0.85238176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37806845" y3="4.99514523" z3="-0.38408607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80761334" y3="3.85207009" z3="-0.89251401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75164234" y3="5.8710583" z3="-0.18741002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08935932" y3="1.61105518" z3="-1.6810373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12772961" y3="0.35924429" z3="0.21531067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.7139879" y3="0.3827568" z3="-0.64241067">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6087873" y3="0.73059794" z3="0.2854239">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66622955" y3="-0.85817213" z3="-1.50584749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09592406" y3="-2.47479397" z3="-1.3225583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.0236228" y3="-5.49768979" z3="-6.27142641">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75684731" y3="-5.0617218" z3="-5.30444602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05693872" y3="-3.91730918" z3="-2.84942883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72403044" y3="-3.68100572" z3="-5.1591948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46858427" y3="-5.886762" z3="-4.2144792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13308202" y3="-5.30844727" z3="-2.99671237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38320422" y3="-3.07707601" z3="-3.9383949">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95593912" y3="-3.01500021" z3="-5.99394925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51865865" y3="-6.97461774" z3="-4.306607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94577852" y3="-5.94020812" z3="-2.12428384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65370845" y3="-3.36746451" z3="-1.60567896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34669144" y3="-3.8495546" z3="-0.85977968">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.69083097" y3="-4.85150694" z3="-1.12932814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38217376" y3="-3.54886703" z3="0.58894014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41916364" y3="-3.07622661" z3="3.34790176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69406931" y3="-4.58368084" z3="1.47936853">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10798351" y3="-2.27306669" z3="1.09128257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12330268" y3="-2.03914399" z3="2.46203134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.70399263" y3="-4.34955253" z3="2.85319917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8877601" y3="-5.59048866" z3="1.09809068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10439587" y3="-1.43300762" z3="0.42893767">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10531014" y3="-1.03245956" z3="2.82231527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.91344568" y3="-5.17395225" z3="3.54003852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42041596" y3="-2.89626942" z3="4.42691709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.336491" y3="-1.74119719" z3="-3.91024041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.4703869" y3="-1.33473209" z3="-3.00829409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33701921" y3="3.71043007" z3="-1.04712889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13139353" y3="-2.98009557" z3="-1.71069981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91937797" y3="-3.15993958" z3="-0.56970423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11018465" y3="-2.28845843" z3="0.36590918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83432507" y3="-0.72218686" z3="0.62690122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70382084" y3="-0.25115068" z3="-0.95515757">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52397501" y3="0.45201817" z3="1.21263683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07010042" y3="-1.06327942" z3="1.989881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40597005" y3="-4.37088909" z3="-0.33953306">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12617541" y3="-4.61276047" z3="0.85963075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00859149" y3="0.04922778" z3="-1.75461831">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36753782" y3="0.61149349" z3="-0.76384444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32729831" y3="-1.08144875" z3="-1.3332164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63388448" y3="0.5508893" z3="0.56465169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16365104" y3="0.1490506" z3="2.21123661">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99041988" y3="1.44993028" z3="1.3089014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53161038" y3="-0.1161267" z3="2.32328933">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88306768" y3="-1.73238628" z3="1.65716929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.5757144" y3="-1.52359435" z3="2.86367296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06197894" y3="-4.03020524" z3="0.8751621">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51706056" y3="-4.36115204" z3="1.74148429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35775303" y3="-5.68627135" z3="0.85051564">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.28129164" y3="-2.19524992" z3="-0.17170018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13717961" y3="-3.29323626" z3="-1.03211478">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.4925199" y3="-4.45139768" z3="-0.61455539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99711487" y3="-4.50660606" z3="0.68270995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14731821" y3="-3.44773088" z3="1.57329474">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78266219" y3="-2.29193894" z3="1.13714848">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49295612" y3="-3.22258716" z3="-2.06325676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.3496955" y3="-5.29216481" z3="-1.29396591">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25872927" y3="-5.69427319" z3="1.1142124">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74157706" y3="-3.52826723" z3="2.58279681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87737555" y3="-1.44370217" z3="1.8166693">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48981353" y3="4.01906996" z3="0.04146377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86080848" y3="3.80692201" z3="-0.01781437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40267828" y3="3.28506453" z3="-1.18735919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61519974" y3="2.99950657" z3="-2.29993423">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24445678" y3="3.20980063" z3="-2.22102905">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04172859" y3="4.38457893" z3="0.96865257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50695785" y3="4.01828263" z3="0.83478466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83856119" y3="2.99905654" z3="-1.2397399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07764155" y3="2.60362697" z3="-3.20487683">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38662356" y3="2.96237906" z3="-3.07625706">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16432523" y3="-5.9046173" z3="2.30244977">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76509947" y3="-6.39715172" z3="0.25126331">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32548552" y3="2.72532525" z3="-2.31545914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46243937" y3="3.03422406" z3="-0.19561444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62654853" y3="0.16444359" z3="-2.02281507">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94985279" y3="1.41121985" z3="-1.88640092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80779901" y3="0.09290614" z3="-2.81180936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28540977" y3="1.19989246" z3="-3.4683059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.32389325" y3="-0.86838342" z3="-2.8965561">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.19163575" y3="1.13265258" z3="-4.07661527">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45279783" y3="2.53136125" z3="-2.60595514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58868609" y3="2.4285485" z3="-3.37257951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92070932" y3="3.48325784" z3="-2.55164192">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95390112" y3="3.30276049" z3="-3.91892501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.578441" y3="3.90745417" z3="-0.25699242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7594959" y3="5.05865249" z3="-0.06552024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.9278434" y3="3.96226674" z3="0.19272168">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44472124" y3="5.1089066" z3="0.74639092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55756093" y3="3.07556674" z3="0.10107681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48429961" y3="5.1249128" z3="1.08556337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32694386" y3="6.23520458" z3="0.49741253">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64230801" y3="6.26636244" z3="0.88894479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.68888702" y3="7.11537766" z3="0.62507133">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.06730673" y3="7.17492461" z3="1.32458775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34941615" y3="-3.92308705" z3="-2.8774103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53134563" y3="-4.96004762" z3="-2.55623436">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22201856" y3="-3.59687991" z3="-3.47443627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47442591" y3="-3.91440832" z3="-3.54657681">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69141408" y3="-1.59148631" z3="-2.08878992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42692178" y3="-1.11378036" z3="-2.76107402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52604821" y3="-0.93293975" z3="-1.22177642">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74186121" y3="-1.63465883" z3="-2.64616784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9198,-.9538,-.6817;6.6042,-1.9498,-1.5459;6.0862,-.9955,-1.4099;4.7751,1.4778,-1.0681;4.2879,.3119,-.5025;2.6549,2.7373,-1.1574;4.0047,2.7358,-.8524;2.3781,4.9951,-.3841;1.8076,3.8521,-.8925;1.7516,5.8711,-.1874;2.0894,1.6111,-1.681;3.1277,.3592,.2153;1.714,.3828,-.6424;.6088,.7306,.2854;1.6662,-.8582,-1.5058;1.0959,-2.4748,-1.3226;2.0236,-5.4977,-6.2714;1.7568,-5.0617,-5.3044;1.0569,-3.9173,-2.8494;1.724,-3.681,-5.1592;1.4686,-5.8868,-4.2145;1.1331,-5.3084,-2.9967;1.3832,-3.0771,-3.9384;1.9559,-3.015,-5.9939;1.5187,-6.9746,-4.3066;.9458,-5.9402,-2.1243;.6537,-3.3675,-1.6057;-.3467,-3.8496,-.8598;-.6908,-4.8515,-1.1293;-.3822,-3.5489,.5889;-.4192,-3.0762,3.3479;-.6941,-4.5837,1.4794;-.108,-2.2731,1.0913;-.1233,-2.0391,2.462;-.704,-4.3496,2.8532;-.8878,-5.5905,1.0981;.1044,-1.433,.4289;.1053,-1.0325,2.8223;-.9134,-5.174,3.54;-.4204,-2.8963,4.4269;1.3365,-1.7412,-3.9102;1.4704,-1.3347,-3.0083;.337,3.7104,-1.0471;-2.1314,-2.9801,-1.7107;-2.9194,-3.1599,-.5697;-3.1102,-2.2885,.3659;-3.8343,-.7222,.6269;-4.7038,-.2512,-.9552;-2.524,.452,1.2126;-5.0701,-1.0633,1.9899;-3.406,-4.3709,-.3395;-4.1262,-4.6128,.8596;-4.0086,.0492,-1.7546;-5.3675,.6115,-.7638;-5.3273,-1.0814,-1.3332;-1.6339,.5509,.5647;-2.1637,.1491,2.2112;-2.9904,1.4499,1.3089;-5.5316,-.1161,2.3233;-5.8831,-1.7324,1.6572;-4.5757,-1.5236,2.8637;-5.062,-4.0302,.8752;-3.5171,-4.3612,1.7415;-4.3578,-5.6863,.8505;4.2813,-2.1952,-.1717;4.1372,-3.2932,-1.0321;3.4925,-4.4514,-.6146;2.9971,-4.5066,.6827;3.1473,-3.4477,1.5733;3.7827,-2.2919,1.1371;4.493,-3.2226,-2.0633;3.3497,-5.2922,-1.294;2.2587,-5.6943,1.1142;2.7416,-3.5283,2.5828;3.8774,-1.4437,1.8167;-.4898,4.0191,.0415;-1.8608,3.8069,-.0178;-2.4027,3.2851,-1.1874;-1.6152,2.9995,-2.2999;-.2445,3.2098,-2.221;-.0417,4.3846,.9687;-2.507,4.0183,.8348;-3.8386,2.9991,-1.2397;-2.0776,2.6036,-3.2049;.3866,2.9624,-3.0763;2.1643,-5.9046,2.3024;1.7651,-6.3972,.2513;-4.3255,2.7253,-2.3155;-4.4624,3.0342,-.1956;6.6265,.1644,-2.0228;5.9499,1.4112,-1.8864;7.8078,.0929,-2.8118;8.2854,1.1999,-3.4683;8.3239,-.8684,-2.8966;9.1916,1.1327,-4.0766;6.4528,2.5314,-2.606;7.5887,2.4285,-3.3726;5.9207,3.4833,-2.5516;7.9539,3.3028,-3.9189;4.5784,3.9075,-.257;3.7595,5.0587,-.0655;5.9278,3.9623,.1927;6.4447,5.1089,.7464;6.5576,3.0756,.1011;7.4843,5.1249,1.0856;4.3269,6.2352,.4974;5.6423,6.2664,.8889;3.6889,7.1154,.6251;6.0673,7.1749,1.3246;-2.3494,-3.9231,-2.8774;-2.5313,-4.96,-2.5562;-3.222,-3.5969,-3.4744;-1.4744,-3.9144,-3.5466;-1.6914,-1.5915,-2.0888;-2.4269,-1.1138,-2.7611;-1.526,-.9329,-1.2218;-.7419,-1.6347,-2.6462;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932424413</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000235436468 0.000050456733 0.019310691199 0.005411240966</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001911343658 0.001274229105</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057140106 -0.000035803 0.000042332 0.000142136 0.000185446 0.000347898 0.000399763 0.000515195 0.000703840 0.000776272 0.000909598 0.001009557 0.001173917 0.001263968 0.001374459 0.001472330 0.001556094 0.001702447 0.001766537 0.002052111 0.002307302 0.002600700 0.002792689 0.003053949 0.003169084 0.003670571 0.003906316 0.004487056 0.004691281 0.004851999 0.005152508 0.005283106 0.005994013 0.006327967 0.006496412 0.006720010 0.006942241 0.007390984 0.008183733 0.008614250 0.008805839 0.009361526 0.009752414 0.009900349 0.010964734 0.011219147 0.011896149 0.012637798 0.013288541 0.013622327 0.013975897 0.014644595 0.014879576 0.015425885 0.015862532 0.015982710 0.016819143 0.018651896 0.019246684 0.019445295 0.020200701 0.020539077 0.021538483 0.021748413 0.022466592 0.022814800 0.023583218 0.023759106 0.024605082 0.025908286 0.026399996 0.027088872 0.027172452 0.027728342 0.028337615 0.028788649 0.029621592 0.031330476 0.031583602 0.034276013 0.034837918 0.036046451 0.039104652 0.039697776 0.042016364 0.045483887 0.046113499 0.046682493 0.048865046 0.049702298 0.050097951 0.050837765 0.051555393 0.052229179 0.052296120 0.052422146 0.053041655 0.053652248 0.055013796 0.056114872 0.056452062 0.056674943 0.056883844 0.057048525 0.057826104 0.058657429 0.059299615 0.059840565 0.061346755 0.062176142 0.062991368 0.064352170 0.064650892 0.065142075 0.066073734 0.067620828 0.067849472 0.069033525 0.070216087 0.070912896 0.072067385 0.072519642 0.072953478 0.073229820 0.078654809 0.080202886 0.081721655 0.082473355 0.083478268 0.084623337 0.089165487 0.089519846 0.089838333 0.091348770 0.093348695 0.094590137 0.095511363 0.096301704 0.096880350 0.098611773 0.100184514 0.100709727 0.102824435 0.104011008 0.104803853 0.107019722 0.109717292 0.111117486 0.112548684 0.112984894 0.114038225 0.115050599 0.117024621 0.117454418 0.118630861 0.119190465 0.120696569 0.122246998 0.125091426 0.125885457 0.128772169 0.129095620 0.131127202 0.133900156 0.137067980 0.137983167 0.138635809 0.139823972 0.140401996 0.143422376 0.144527234 0.145923859 0.146820281 0.152001286 0.153600229 0.154095556 0.159276191 0.160826294 0.168581205 0.171488167 0.176709098 0.179249004 0.181690888 0.184542557 0.189225961 0.190800646 0.192003166 0.201394830 0.202262330 0.206378713 0.206972786 0.207278032 0.212511151 0.213034100 0.215661789 0.216990315 0.220412038 0.220929964 0.224622932 0.225211195 0.227210742 0.231921623 0.234640560 0.236286990 0.238617201 0.246332514 0.248442809 0.252819836 0.256626058 0.257252191 0.258365141 0.262590157 0.271611060 0.282939942 0.292084023 0.300173868 0.300283169 0.301140687 0.307223703 0.307816134 0.309866005 0.320038863 0.321432237 0.326516005 0.330963069 0.336696631 0.347827335 0.352060013 0.355654593 0.360874570 0.362173489 0.364160703 0.384576167 0.408097081 0.414401881 0.430324657 0.431412276 0.435506886 0.451177408 0.465239652 0.475731822 0.479046380 0.480530423 0.486950633 0.498908238 0.503894583 0.515253276 0.518102533 0.544113075 0.566952190 0.567802249 0.586948285 0.591735059 0.606129017 0.644300946 0.645878675 0.668168609 0.675658674 0.687434219 0.703450915 0.704197679 0.704443412 0.711862423 0.717410426 0.734397496 0.738046384 0.739803543 0.746926892 0.750950305 0.771639750 0.776015519 0.809440808 0.821904639 0.824342155 0.828959747 0.834357948 0.848415184 0.849626620 0.851452633 0.854847178 0.863559978 0.867481294 0.876021621 0.887598385 0.891401375 0.892372234 0.893806863 0.902143862 0.910666686 0.917977159 0.922660025 0.924571469 0.932052354 0.936429453 0.956182421 0.962581949 0.965410968 0.970137492 0.976978995 0.982588679 0.998856648 1.013127089 1.016331554 1.022030790 1.040371532 1.055692213 1.071600254 1.073189041 1.080761237 1.087641430 1.108745450 1.110451397 1.118330852 1.119324236 1.122646287 1.124057934 1.141964208 1.150191966 1.161786752 1.170211389 1.177619794 1.189111191 1.200845581 1.222232887 1.234297055 1.258320085 1.296587844 1.299969627 1.314819120 1.326481310 1.327483743 1.330397540 1.331498362 1.334852674 1.342662533 1.349318180 1.369281025 1.380025467 1.381354790 1.382026276 1.429460804 1.512124486 1.558003106 1.684874365 1.922709450</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">321</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91712349" y3="-0.95309788" z3="-0.68430491">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59954467" y3="-1.95063695" z3="-1.55075577">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08195585" y3="-0.99608171" z3="-1.41493563">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77289837" y3="1.47806368" z3="-1.072896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28601881" y3="0.31301763" z3="-0.50545785">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65357378" y3="2.73938109" z3="-1.15772374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00395531" y3="2.73672923" z3="-0.85551607">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.3795728" y3="4.99634645" z3="-0.38011186">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80762301" y3="3.85443151" z3="-0.88950296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75413074" y3="5.87189711" z3="-0.18187198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08600894" y3="1.61391266" z3="-1.6810359">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12689475" y3="0.36180602" z3="0.21389066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71214475" y3="0.38521565" z3="-0.64228156">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60789503" y3="0.73229262" z3="0.28699955">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66389556" y3="-0.85570091" z3="-1.5056872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09654022" y3="-2.47347612" z3="-1.32119518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04293349" y3="-5.50356354" z3="-6.26182552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.77207606" y3="-5.06620503" z3="-5.29659235">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06245589" y3="-3.91829475" z3="-2.84597054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73756452" y3="-3.68526759" z3="-5.15373749">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48027206" y3="-5.88970845" z3="-4.20638567">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13992336" y3="-5.30962596" z3="-2.99080361">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.39172332" y3="-3.07954582" z3="-3.93518535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.97207721" y3="-3.02048405" z3="-5.98875117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53150233" y3="-6.97768974" z3="-4.29651962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95014947" y3="-5.94013194" z3="-2.11796739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65567754" y3="-3.36694128" z3="-1.60405988">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34588589" y3="-3.84884304" z3="-0.85989191">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.6894155" y3="-4.85096953" z3="-1.12979334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38424264" y3="-3.54778443" z3="0.58870951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.42603879" y3="-3.07591947" z3="3.34786828">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69954951" y3="-4.58225858" z3="1.47840993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10886849" y3="-2.27280861" z3="1.09193111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.1268522" y3="-2.03904579" z3="2.46266279">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.71200634" y3="-4.34845644" z3="2.85223739">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.89353765" y3="-5.5891208" z3="1.09674643">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10616926" y3="-1.43286012" z3="0.43024537">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10263285" y3="-1.03272719" z3="2.82356612">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.92431633" y3="-5.17260503" z3="3.53832023">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.42950355" y3="-2.89591352" z3="4.42685656">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34374751" y3="-1.74367565" z3="-3.90946822">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47399271" y3="-1.33538166" z3="-3.00783293">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33672884" y3="3.71369968" z3="-1.04184912">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.12932982" y3="-2.97904925" z3="-1.71409116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91958374" y3="-3.16057985" z3="-0.57497714">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11186187" y3="-2.29061752" z3="0.3617825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83578945" y3="-0.72470963" z3="0.62534433">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70195486" y3="-0.24929122" z3="-0.95699613">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52628269" y3="0.44791009" z3="1.21588251">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07369058" y3="-1.06894894" z3="1.9859014">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40699961" y3="-4.37184475" z3="-0.34780501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.13044754" y3="-4.6155251" z3="0.84911806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00458984" y3="0.0552197" z3="-1.75301405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36767532" y3="0.6115861" z3="-0.76453837">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32275308" y3="-1.07921177" z3="-1.34033851">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63775042" y3="0.55224105" z3="0.56649012">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16318291" y3="0.13940897" z3="2.21170202">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99428943" y3="1.44456255" z3="1.31906368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53470901" y3="-0.12249026" z3="2.32179221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88682923" y3="-1.73646084" z3="1.65047374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58035109" y3="-1.5323192" z3="2.85866868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.06543234" y3="-4.03185298" z3="0.86363503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.52297052" y3="-4.36595235" z3="1.73302992">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.36346121" y3="-5.68847616" z3="0.83696351">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27949369" y3="-2.1936651" z3="-0.17106445">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13639748" y3="-3.29422339" z3="-1.02837428">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49243583" y3="-4.45172582" z3="-0.60769008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99614363" y3="-4.50339909" z3="0.689363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14564129" y3="-3.44197548" z3="1.57710231">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78076162" y3="-2.28719746" z3="1.13803064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49237485" y3="-3.22639469" z3="-2.05963758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35072317" y3="-5.29467624" z3="-1.28471399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.25721727" y3="-5.68970454" z3="1.12345893">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73949738" y3="-3.51977838" z3="2.58665817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87511561" y3="-1.43729672" z3="1.81538066">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48745771" y3="4.01497893" z3="0.05083908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85856493" y3="3.80303034" z3="-0.00659008">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.403127" y3="3.28855074" z3="-1.17810726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61827292" y3="3.01038531" z3="-2.29448517">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24745026" y3="3.22077084" z3="-2.21775138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03706133" y3="4.37438253" z3="0.97927918">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50274439" y3="4.00883616" z3="0.84887015">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83921122" y3="3.00278105" z3="-1.2290796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.0829441" y3="2.62048395" z3="-3.20092398">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.3815247" y3="2.97945044" z3="-3.0761845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16173187" y3="-5.89673397" z3="2.31215176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7641809" y3="-6.39476189" z3="0.2619599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32754937" y3="2.73094648" z3="-2.30462931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46178534" y3="3.03612883" z3="-0.18409369">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62137358" y3="0.16289823" z3="-2.03057569">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94580597" y3="1.41019768" z3="-1.8936604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.8004842" y3="0.08993852" z3="-2.82261462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27699987" y3="1.19604385" z3="-3.48140729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31573037" y3="-0.87174187" z3="-2.90792176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18144946" y3="1.12764252" z3="-4.09221778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44777364" y3="2.52955065" z3="-2.61509502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5815034" y3="2.42531615" z3="-3.38471075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91650931" y3="3.48186338" z3="-2.55991773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94592917" y3="3.29881722" z3="-3.9327245">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57958774" y3="3.9072494" z3="-0.25959001">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76165275" y3="5.0585701" z3="-0.06419466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.93011489" y3="3.9605723" z3="0.18711566">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44868517" y3="5.10588485" z3="0.74210229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55960564" y3="3.07343738" z3="0.09087072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.4892668" y3="5.1206638" z3="1.07864867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33102824" y3="6.23376929" z3="0.49958325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64712212" y3="6.26349998" z3="0.88864301">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69397311" y3="7.11375819" z3="0.62877144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07364009" y3="7.1710441" z3="1.32484954">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34418686" y3="-3.92036113" z3="-2.88249376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52646502" y3="-4.95782237" z3="-2.5631344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21538187" y3="-3.59373814" z3="-3.48133668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.46743173" y3="-3.91055742" z3="-3.54926328">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.68848395" y3="-1.59005867" z3="-2.08934864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42364646" y3="-1.11056691" z3="-2.76099869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.5230219" y3="-0.93312544" z3="-1.22093583">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.73927626" y3="-1.63284238" z3="-2.64687135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9171,-.9531,-.6843;6.5995,-1.9506,-1.5508;6.082,-.9961,-1.4149;4.7729,1.4781,-1.0729;4.286,.313,-.5055;2.6536,2.7394,-1.1577;4.004,2.7367,-.8555;2.3796,4.9963,-.3801;1.8076,3.8544,-.8895;1.7541,5.8719,-.1819;2.086,1.6139,-1.681;3.1269,.3618,.2139;1.7121,.3852,-.6423;.6079,.7323,.287;1.6639,-.8557,-1.5057;1.0965,-2.4735,-1.3212;2.0429,-5.5036,-6.2618;1.7721,-5.0662,-5.2966;1.0625,-3.9183,-2.846;1.7376,-3.6853,-5.1537;1.4803,-5.8897,-4.2064;1.1399,-5.3096,-2.9908;1.3917,-3.0795,-3.9352;1.9721,-3.0205,-5.9888;1.5315,-6.9777,-4.2965;.9501,-5.9401,-2.118;.6557,-3.3669,-1.6041;-.3459,-3.8488,-.8599;-.6894,-4.851,-1.1298;-.3842,-3.5478,.5887;-.426,-3.0759,3.3479;-.6995,-4.5823,1.4784;-.1089,-2.2728,1.0919;-.1269,-2.039,2.4627;-.712,-4.3485,2.8522;-.8935,-5.5891,1.0967;.1062,-1.4329,.4302;.1026,-1.0327,2.8236;-.9243,-5.1726,3.5383;-.4295,-2.8959,4.4269;1.3437,-1.7437,-3.9095;1.474,-1.3354,-3.0078;.3367,3.7137,-1.0418;-2.1293,-2.979,-1.7141;-2.9196,-3.1606,-.575;-3.1119,-2.2906,.3618;-3.8358,-.7247,.6253;-4.702,-.2493,-.957;-2.5263,.4479,1.2159;-5.0737,-1.0689,1.9859;-3.407,-4.3718,-.3478;-4.1304,-4.6155,.8491;-4.0046,.0552,-1.753;-5.3677,.6116,-.7645;-5.3228,-1.0792,-1.3403;-1.6378,.5522,.5665;-2.1632,.1394,2.2117;-2.9943,1.4446,1.3191;-5.5347,-.1225,2.3218;-5.8868,-1.7365,1.6505;-4.5804,-1.5323,2.8587;-5.0654,-4.0319,.8636;-3.523,-4.366,1.733;-4.3635,-5.6885,.837;4.2795,-2.1937,-.1711;4.1364,-3.2942,-1.0284;3.4924,-4.4517,-.6077;2.9961,-4.5034,.6894;3.1456,-3.442,1.5771;3.7808,-2.2872,1.138;4.4924,-3.2264,-2.0596;3.3507,-5.2947,-1.2847;2.2572,-5.6897,1.1235;2.7395,-3.5198,2.5867;3.8751,-1.4373,1.8154;-.4875,4.015,.0508;-1.8586,3.803,-.0066;-2.4031,3.2886,-1.1781;-1.6183,3.0104,-2.2945;-.2475,3.2208,-2.2178;-.0371,4.3744,.9793;-2.5027,4.0088,.8489;-3.8392,3.0028,-1.2291;-2.0829,2.6205,-3.2009;.3815,2.9795,-3.0762;2.1617,-5.8967,2.3122;1.7642,-6.3948,.262;-4.3275,2.7309,-2.3046;-4.4618,3.0361,-.1841;6.6214,.1629,-2.0306;5.9458,1.4102,-1.8937;7.8005,.0899,-2.8226;8.277,1.196,-3.4814;8.3157,-.8717,-2.9079;9.1814,1.1276,-4.0922;6.4478,2.5296,-2.6151;7.5815,2.4253,-3.3847;5.9165,3.4819,-2.5599;7.9459,3.2988,-3.9327;4.5796,3.9072,-.2596;3.7617,5.0586,-.0642;5.9301,3.9606,.1871;6.4487,5.1059,.7421;6.5596,3.0734,.0909;7.4893,5.1207,1.0786;4.331,6.2338,.4996;5.6471,6.2635,.8886;3.694,7.1138,.6288;6.0736,7.171,1.3248;-2.3442,-3.9204,-2.8825;-2.5265,-4.9578,-2.5631;-3.2154,-3.5937,-3.4813;-1.4674,-3.9106,-3.5493;-1.6885,-1.5901,-2.0893;-2.4236,-1.1106,-2.761;-1.523,-.9331,-1.2209;-.7393,-1.6328,-2.6469;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662930177601</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000408852309 0.000086978017 0.020851883775 0.005375315724</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057141014 -0.000038037 0.000052569 0.000140473 0.000228076 0.000342392 0.000386631 0.000514536 0.000703811 0.000777557 0.000910502 0.001009507 0.001175875 0.001265606 0.001374166 0.001472846 0.001554552 0.001702547 0.001766707 0.002051623 0.002306430 0.002602798 0.002792777 0.003054043 0.003169022 0.003670668 0.003906281 0.004487206 0.004691610 0.004852117 0.005152280 0.005281132 0.005993952 0.006327507 0.006496364 0.006720025 0.006941562 0.007390909 0.008183719 0.008614126 0.008805998 0.009362121 0.009752679 0.009900298 0.010964801 0.011219007 0.011896883 0.012637921 0.013286593 0.013622161 0.013975942 0.014644539 0.014879934 0.015426921 0.015862279 0.015982054 0.016819344 0.018651943 0.019247563 0.019445107 0.020201398 0.020539016 0.021539238 0.021747961 0.022466180 0.022814842 0.023586174 0.023759042 0.024605876 0.025908356 0.026400197 0.027088770 0.027170358 0.027734142 0.028332575 0.028802670 0.029628006 0.031342197 0.031583632 0.034276912 0.034838258 0.036046457 0.039105087 0.039697975 0.042016486 0.045485419 0.046113505 0.046684147 0.048866446 0.049702314 0.050097969 0.050837804 0.051555382 0.052229444 0.052296246 0.052422441 0.053042245 0.053652344 0.055014890 0.056114698 0.056451977 0.056674321 0.056883441 0.057048750 0.057826486 0.058658173 0.059300562 0.059841597 0.061347042 0.062176264 0.062991502 0.064352275 0.064653991 0.065142424 0.066075506 0.067623112 0.067848489 0.069033411 0.070212177 0.070909400 0.072066789 0.072520487 0.072953686 0.073239975 0.078653749 0.080199485 0.081719595 0.082481728 0.083477961 0.084624137 0.089167179 0.089521524 0.089839093 0.091348543 0.093349003 0.094590250 0.095511720 0.096301939 0.096880323 0.098614151 0.100184065 0.100709629 0.102824521 0.104010987 0.104806545 0.107022579 0.109724441 0.111117977 0.112548623 0.112989972 0.114038051 0.115055848 0.117024571 0.117454592 0.118630311 0.119190270 0.120696890 0.122246922 0.125091826 0.125887138 0.128773267 0.129097783 0.131130469 0.133900171 0.137071888 0.137984267 0.138637461 0.139827903 0.140401830 0.143422601 0.144527530 0.145925920 0.146820145 0.152000829 0.153597419 0.154095864 0.159276513 0.160826387 0.168581940 0.171488029 0.176710458 0.179248996 0.181691350 0.184542271 0.189225868 0.190800277 0.192003681 0.201394997 0.202262688 0.206378974 0.206972962 0.207278063 0.212511793 0.213040500 0.215661880 0.216990244 0.220411888 0.220931531 0.224623154 0.225213700 0.227210775 0.231921728 0.234641628 0.236287192 0.238618726 0.246332847 0.248443993 0.252823267 0.256626360 0.257252138 0.258365709 0.262590185 0.271611369 0.282940085 0.292085470 0.300175001 0.300283296 0.301140818 0.307224450 0.307816327 0.309866031 0.320044525 0.321432427 0.326516005 0.330963273 0.336696828 0.347828841 0.352060791 0.355654543 0.360874608 0.362173450 0.364160899 0.384576717 0.408127055 0.414401865 0.430324879 0.431414646 0.435510271 0.451177868 0.465257259 0.475735488 0.479046674 0.480530973 0.486959626 0.498908243 0.503896876 0.515256273 0.518107178 0.544121727 0.566952335 0.567805319 0.586950941 0.591737370 0.606129937 0.644304284 0.645885197 0.668169510 0.675659921 0.687434399 0.703456538 0.704200433 0.704445459 0.711882269 0.717415344 0.734399550 0.738046369 0.739805124 0.746932667 0.750954625 0.771640399 0.776016545 0.809441127 0.821906198 0.824343157 0.828959826 0.834358110 0.848415113 0.849627134 0.851453209 0.854853185 0.863561136 0.867481388 0.876022098 0.887598619 0.891404291 0.892375402 0.893807042 0.902143865 0.910666779 0.917977657 0.922660119 0.924571466 0.932052948 0.936447393 0.956184069 0.962587728 0.965411538 0.970139796 0.976982336 0.982589565 0.998863673 1.013127900 1.016332292 1.022033172 1.040372795 1.055711077 1.071613401 1.073194556 1.080767106 1.087642115 1.108751288 1.110451878 1.118331312 1.119324295 1.122646472 1.124060177 1.141966265 1.150196814 1.161787066 1.170212046 1.177624928 1.189111998 1.200845684 1.222235087 1.234297080 1.258321128 1.296588878 1.299985161 1.314821210 1.326481595 1.327491164 1.330398365 1.331498432 1.334853043 1.342669056 1.349319471 1.369283416 1.380025854 1.381354800 1.382028347 1.429461882 1.512144502 1.558003284 1.684874807 1.922709977</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">322</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91277464" y3="-0.95422119" z3="-0.6867789">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59546797" y3="-1.95160351" z3="-1.55293075">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.07812392" y3="-0.99697531" z3="-1.41663514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77022507" y3="1.47748239" z3="-1.07264109">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28214032" y3="0.31201254" z3="-0.50704141">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65215065" y3="2.74093437" z3="-1.15692429">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00235677" y3="2.7365534" z3="-0.85406535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.38011692" y3="4.99711282" z3="-0.37692249">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80711352" y3="3.85635147" z3="-0.88758394">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.7551805" y3="5.87326585" z3="-0.17626092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08390292" y3="1.61663958" z3="-1.68206051">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12262889" y3="0.3606319" z3="0.21166296">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.70822085" y3="0.38712682" z3="-0.64500479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.6042805" y3="0.73496325" z3="0.28434888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65833777" y3="-0.85282501" z3="-1.50969589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09480206" y3="-2.47193932" z3="-1.3240493">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.04019952" y3="-5.50435928" z3="-6.26339625">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76988134" y3="-5.06679775" z3="-5.29811258">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.06144077" y3="-3.91836368" z3="-2.8474198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.73375347" y3="-3.68583412" z3="-5.15603332">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.48036411" y3="-5.89003915" z3="-4.20708838">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.1405544" y3="-5.30970268" z3="-2.99149011">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38855352" y3="-3.07983823" z3="-3.93744778">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96645524" y3="-3.02119491" z3="-5.99166273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.53292146" y3="-6.97800612" z3="-4.29663982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.95255625" y3="-5.94003972" z3="-2.11815531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65528703" y3="-3.36647161" z3="-1.60554485">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34384789" y3="-3.84974494" z3="-0.85886956">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68578461" y3="-4.85289754" z3="-1.12663599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38039349" y3="-3.54592565" z3="0.58907044">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41527392" y3="-3.06724305" z3="3.34688198">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68846197" y3="-4.57963151" z3="1.4820412">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10949433" y3="-2.26819715" z3="1.08823891">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12360595" y3="-2.0312409" z3="2.45842117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69727455" y3="-4.34242993" z3="2.85535218">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87986703" y3="-5.58772222" z3="1.10320025">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.0998093" y3="-1.42922687" z3="0.42368111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10256358" y3="-1.02305675" z3="2.81600287">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90346445" y3="-5.16589816" z3="3.54429046">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41550577" y3="-2.88497933" z3="4.42548834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33910555" y3="-1.74401779" z3="-3.91255995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46894159" y3="-1.33468301" z3="-3.01132697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33598242" y3="3.717013" z3="-1.03962774">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13127315" y3="-2.98592131" z3="-1.71316276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91860611" y3="-3.16321053" z3="-0.57149496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11120381" y3="-2.28862685" z3="0.36085728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83605648" y3="-0.7222868" z3="0.61892466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69501652" y3="-0.24599481" z3="-0.96736806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52736558" y3="0.44844653" z3="1.21486867">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.0816386" y3="-1.064106" z3="1.97277593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40272092" y3="-4.37430037" z3="-0.33679551">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12117855" y3="-4.61350984" z3="0.86387795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.99479348" y3="0.0609952" z3="-1.75995116">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36297626" y3="0.61340203" z3="-0.77612496">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.31303628" y3="-1.07614605" z3="-1.35464872">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.634995" y3="0.54921591" z3="0.57022177">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.17112387" y3="0.14083304" z3="2.21352657">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99347371" y3="1.44624029" z3="1.3134883">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54361368" y3="-0.11680842" z3="2.30507316">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89365495" y3="-1.73079923" z3="1.63283572">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.59430069" y3="-1.52733417" z3="2.84898602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.0573045" y3="-4.03147264" z3="0.87942906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51100386" y3="-4.35959486" z3="1.7442376">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35206463" y3="-5.68722853" z3="0.85781242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27543297" y3="-2.19526622" z3="-0.17433597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13437817" y3="-3.29605578" z3="-1.03169458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49265536" y3="-4.4547637" z3="-0.61106796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99671668" y3="-4.50760758" z3="0.68605397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14373236" y3="-3.44580736" z3="1.57367269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.77635831" y3="-2.28963406" z3="1.13457339">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.4904281" y3="-3.22760164" z3="-2.06288135">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35257606" y3="-5.29788375" z3="-1.28811668">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26093671" y3="-5.69584173" z3="1.12039829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73764603" y3="-3.52444863" z3="2.58318758">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.86865446" y3="-1.4393583" z3="1.81183746">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48772319" y3="4.01753149" z3="0.05353334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.85896586" y3="3.80641577" z3="-0.00373299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40416727" y3="3.29399456" z3="-1.17592951">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.6198093" y3="3.01699272" z3="-2.29286269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24871756" y3="3.2259321" z3="-2.21584536">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.03685846" y3="4.37544546" z3="0.98233697">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50274273" y3="4.01140079" z3="0.85218631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.84029027" y3="3.0087576" z3="-1.22678973">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08495555" y3="2.62866808" z3="-3.19969366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.37997936" y3="2.98520385" z3="-3.07474456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.1676399" y3="-5.90400771" z3="2.30910229">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76800938" y3="-6.40129196" z3="0.25911511">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32998635" y3="2.74312616" z3="-2.30330003">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46155122" y3="3.03622642" z3="-0.18084194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61866681" y3="0.16237585" z3="-2.03050086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94372832" y3="1.40992405" z3="-1.89258405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79855611" y3="0.08966726" z3="-2.82141892">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27650163" y3="1.19636295" z3="-3.47815558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31329278" y3="-0.87225192" z3="-2.90743859">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.1816413" y3="1.12822939" z3="-4.08797592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44705328" y3="2.52985611" z3="-2.61217201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.5815986" y3="2.42593784" z3="-3.38062368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91629223" y3="3.48242905" z3="-2.55633675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94717543" y3="3.29996368" z3="-3.92702254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57907172" y3="3.90574765" z3="-0.2567438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.7622484" y3="5.05765909" z3="-0.06062728">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92928104" y3="3.95711721" z3="0.19098179">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44883522" y3="5.10127078" z3="0.74724924">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55741393" y3="3.06977474" z3="0.09624466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48888464" y3="5.11460446" z3="1.08501233">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.33242691" y3="6.23160018" z3="0.50497917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64846385" y3="6.25950373" z3="0.89456344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69590532" y3="7.11239888" z3="0.63667171">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07551946" y3="7.16601943" z3="1.33246399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34685593" y3="-3.93367682" z3="-2.8763371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.52800344" y3="-4.96950168" z3="-2.55124417">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.21918244" y3="-3.61087952" z3="-3.47564031">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47113726" y3="-3.92657971" z3="-3.54458553">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69344123" y3="-1.59804888" z3="-2.09606444">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.429482" y3="-1.12403019" z3="-2.77029407">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52950584" y3="-0.93618647" z3="-1.2312975">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74347992" y3="-1.64152078" z3="-2.65274671">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9128,-.9542,-.6868;6.5955,-1.9516,-1.5529;6.0781,-.997,-1.4166;4.7702,1.4775,-1.0726;4.2821,.312,-.507;2.6522,2.7409,-1.1569;4.0024,2.7366,-.8541;2.3801,4.9971,-.3769;1.8071,3.8564,-.8876;1.7552,5.8733,-.1763;2.0839,1.6166,-1.6821;3.1226,.3606,.2117;1.7082,.3871,-.645;.6043,.735,.2843;1.6583,-.8528,-1.5097;1.0948,-2.4719,-1.324;2.0402,-5.5044,-6.2634;1.7699,-5.0668,-5.2981;1.0614,-3.9184,-2.8474;1.7338,-3.6858,-5.156;1.4804,-5.89,-4.2071;1.1406,-5.3097,-2.9915;1.3886,-3.0798,-3.9374;1.9665,-3.0212,-5.9917;1.5329,-6.978,-4.2966;.9526,-5.94,-2.1182;.6553,-3.3665,-1.6055;-.3438,-3.8497,-.8589;-.6858,-4.8529,-1.1266;-.3804,-3.5459,.5891;-.4153,-3.0672,3.3469;-.6885,-4.5796,1.482;-.1095,-2.2682,1.0882;-.1236,-2.0312,2.4584;-.6973,-4.3424,2.8554;-.8799,-5.5877,1.1032;.0998,-1.4292,.4237;.1026,-1.0231,2.816;-.9035,-5.1659,3.5443;-.4155,-2.885,4.4255;1.3391,-1.744,-3.9126;1.4689,-1.3347,-3.0113;.336,3.717,-1.0396;-2.1313,-2.9859,-1.7132;-2.9186,-3.1632,-.5715;-3.1112,-2.2886,.3609;-3.8361,-.7223,.6189;-4.695,-.246,-.9674;-2.5274,.4484,1.2149;-5.0816,-1.0641,1.9728;-3.4027,-4.3743,-.3368;-4.1212,-4.6135,.8639;-3.9948,.061,-1.76;-5.363,.6134,-.7761;-5.313,-1.0761,-1.3546;-1.635,.5492,.5702;-2.1711,.1408,2.2135;-2.9935,1.4462,1.3135;-5.5436,-.1168,2.3051;-5.8937,-1.7308,1.6328;-4.5943,-1.5273,2.849;-5.0573,-4.0315,.8794;-3.511,-4.3596,1.7442;-4.3521,-5.6872,.8578;4.2754,-2.1953,-.1743;4.1344,-3.2961,-1.0317;3.4927,-4.4548,-.6111;2.9967,-4.5076,.6861;3.1437,-3.4458,1.5737;3.7764,-2.2896,1.1346;4.4904,-3.2276,-2.0629;3.3526,-5.2979,-1.2881;2.2609,-5.6958,1.1204;2.7376,-3.5244,2.5832;3.8687,-1.4394,1.8118;-.4877,4.0175,.0535;-1.859,3.8064,-.0037;-2.4042,3.294,-1.1759;-1.6198,3.017,-2.2929;-.2487,3.2259,-2.2158;-.0369,4.3754,.9823;-2.5027,4.0114,.8522;-3.8403,3.0088,-1.2268;-2.085,2.6287,-3.1997;.38,2.9852,-3.0747;2.1676,-5.904,2.3091;1.768,-6.4013,.2591;-4.33,2.7431,-2.3033;-4.4616,3.0362,-.1808;6.6187,.1624,-2.0305;5.9437,1.4099,-1.8926;7.7986,.0897,-2.8214;8.2765,1.1964,-3.4782;8.3133,-.8723,-2.9074;9.1816,1.1282,-4.088;6.4471,2.5299,-2.6122;7.5816,2.4259,-3.3806;5.9163,3.4824,-2.5563;7.9472,3.3,-3.927;4.5791,3.9057,-.2567;3.7622,5.0577,-.0606;5.9293,3.9571,.191;6.4488,5.1013,.7472;6.5574,3.0698,.0962;7.4889,5.1146,1.085;4.3324,6.2316,.505;5.6485,6.2595,.8946;3.6959,7.1124,.6367;6.0755,7.166,1.3325;-2.3469,-3.9337,-2.8763;-2.528,-4.9695,-2.5512;-3.2192,-3.6109,-3.4756;-1.4711,-3.9266,-3.5446;-1.6934,-1.598,-2.0961;-2.4295,-1.124,-2.7703;-1.5295,-.9362,-1.2313;-.7435,-1.6415,-2.6527;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931231127</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000340219697 0.000074665014 0.016829504904 0.004908691040</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001500000000 0.001000000000</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057140808 0.000004207 0.000055689 0.000163153 0.000241960 0.000366142 0.000397410 0.000514731 0.000704299 0.000777734 0.000910613 0.001009539 0.001179611 0.001266216 0.001374140 0.001472751 0.001553324 0.001702046 0.001766861 0.002051325 0.002305943 0.002602874 0.002792969 0.003054010 0.003168280 0.003670344 0.003906872 0.004488014 0.004691630 0.004852065 0.005152224 0.005280891 0.005994174 0.006327216 0.006496258 0.006720596 0.006941589 0.007391152 0.008183756 0.008614084 0.008805967 0.009362133 0.009752812 0.009900299 0.010965004 0.011219174 0.011896983 0.012637862 0.013285995 0.013621984 0.013975952 0.014645239 0.014880380 0.015426886 0.015862680 0.015982486 0.016820061 0.018651915 0.019247708 0.019445289 0.020200941 0.020539026 0.021539429 0.021747293 0.022466345 0.022814770 0.023587416 0.023758641 0.024606395 0.025908529 0.026400039 0.027088831 0.027170300 0.027735125 0.028330011 0.028807255 0.029630394 0.031351172 0.031583501 0.034276875 0.034838819 0.036047073 0.039105036 0.039697905 0.042016603 0.045485545 0.046113372 0.046683165 0.048866408 0.049702325 0.050098031 0.050837804 0.051555387 0.052229457 0.052296254 0.052422539 0.053042272 0.053652351 0.055015042 0.056114671 0.056452012 0.056674218 0.056882788 0.057048668 0.057826402 0.058658126 0.059301183 0.059841569 0.061347002 0.062176439 0.062991662 0.064352372 0.064655858 0.065142445 0.066075667 0.067623409 0.067848715 0.069033525 0.070211657 0.070907360 0.072067016 0.072520937 0.072953220 0.073243183 0.078654143 0.080198760 0.081718779 0.082482598 0.083477936 0.084624071 0.089167305 0.089522069 0.089839475 0.091348470 0.093349271 0.094590462 0.095511959 0.096302531 0.096880296 0.098615158 0.100184020 0.100709562 0.102824813 0.104010845 0.104806466 0.107023264 0.109726534 0.111118384 0.112548841 0.112991149 0.114038143 0.115057586 0.117024595 0.117454791 0.118630294 0.119190131 0.120697078 0.122247105 0.125091507 0.125888003 0.128773349 0.129098681 0.131132412 0.133900354 0.137072599 0.137984910 0.138636852 0.139831234 0.140401815 0.143422353 0.144527685 0.145927426 0.146820232 0.152000699 0.153596793 0.154095926 0.159278095 0.160826339 0.168582141 0.171488034 0.176710065 0.179249506 0.181691511 0.184542154 0.189225700 0.190800759 0.192002640 0.201395006 0.202262740 0.206379010 0.206972974 0.207278159 0.212511717 0.213042872 0.215662396 0.216990956 0.220411958 0.220931444 0.224623082 0.225216090 0.227211118 0.231921734 0.234642269 0.236287227 0.238619498 0.246332548 0.248441939 0.252823585 0.256626487 0.257252188 0.258365945 0.262590153 0.271611391 0.282940456 0.292086272 0.300175721 0.300283432 0.301140908 0.307224715 0.307816369 0.309866139 0.320046046 0.321433266 0.326516037 0.330963864 0.336697067 0.347830042 0.352061668 0.355654531 0.360874738 0.362173530 0.364161075 0.384576910 0.408140997 0.414403892 0.430325423 0.431415267 0.435510493 0.451178263 0.465270377 0.475737897 0.479047492 0.480531716 0.486968978 0.498908313 0.503898658 0.515256406 0.518109599 0.544122726 0.566952723 0.567808471 0.586951588 0.591737782 0.606130546 0.644306423 0.645886416 0.668169968 0.675660060 0.687434930 0.703458576 0.704203781 0.704446483 0.711889037 0.717418107 0.734399808 0.738046419 0.739806887 0.746936721 0.750956593 0.771640638 0.776017209 0.809441651 0.821906785 0.824343339 0.828959869 0.834358237 0.848415263 0.849627427 0.851454620 0.854858277 0.863562143 0.867481526 0.876022500 0.887598714 0.891405516 0.892384127 0.893807905 0.902144251 0.910667014 0.917978088 0.922661701 0.924571493 0.932053265 0.936456814 0.956187123 0.962588438 0.965411689 0.970140378 0.976983262 0.982589759 0.998867389 1.013128883 1.016333172 1.022034778 1.040374800 1.055723600 1.071621963 1.073196439 1.080771118 1.087642700 1.108760240 1.110452841 1.118331507 1.119324332 1.122646723 1.124061395 1.141967687 1.150198662 1.161787226 1.170212539 1.177626736 1.189112459 1.200845857 1.222236748 1.234297241 1.258321214 1.296590785 1.299987470 1.314823974 1.326481651 1.327493633 1.330399011 1.331498680 1.334853024 1.342670759 1.349319881 1.369286381 1.380025855 1.381354808 1.382031944 1.429462169 1.512149380 1.558003412 1.684874802 1.922710017</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">323</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91575518" y3="-0.95496517" z3="-0.68847037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.59799427" y3="-1.94983887" z3="-1.55844636">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08020875" y3="-0.99577446" z3="-1.41991151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77099516" y3="1.47717974" z3="-1.0705181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28445061" y3="0.31055928" z3="-0.50605929">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65173748" y3="2.73843994" z3="-1.15293477">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00189016" y3="2.73517213" z3="-0.84994501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37741101" y3="4.99363263" z3="-0.37068593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80560723" y3="3.85298206" z3="-0.8831604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75202971" y3="5.8690482" z3="-0.17105058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08483655" y3="1.61370465" z3="-1.67859627">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1256354" y3="0.35741691" z3="0.21388868">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71021502" y3="0.38418834" z3="-0.6410735">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60747517" y3="0.73258075" z3="0.28949617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.65890471" y3="-0.85571432" z3="-1.50572594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09590943" y3="-2.47556068" z3="-1.32159885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02849907" y3="-5.50379986" z3="-6.26643438">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76107176" y3="-5.06704224" z3="-5.29999602">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05945533" y3="-3.92056131" z3="-2.84635834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72855439" y3="-3.68627889" z3="-5.15576028">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47159856" y3="-5.89117842" z3="-4.20963072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13531175" y3="-5.31183512" z3="-2.99263779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38686627" y3="-3.08123894" z3="-3.93568616">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.96138591" y3="-3.02094164" z3="-5.9907906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52137493" y3="-6.97911357" z3="-4.30084812">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94734401" y3="-5.9430026" z3="-2.11993984">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65582279" y3="-3.3698494" z3="-1.60310194">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34319363" y3="-3.8523608" z3="-0.85601058">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68573528" y3="-4.85552473" z3="-1.12309702">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37872013" y3="-3.54795776" z3="0.59193097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.4100998" y3="-3.06861339" z3="3.34982041">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68428023" y3="-4.58173563" z3="1.48576556">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10849784" y3="-2.27001328" z3="1.09039371">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12120191" y3="-2.03239762" z3="2.46046405">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69132991" y3="-4.34416129" z3="2.85905425">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87472588" y3="-5.59062659" z3="1.1077597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09873342" y3="-1.43099726" z3="0.42517036">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10408322" y3="-1.02368361" z3="2.81724829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89576555" y3="-5.16759295" z3="3.5483854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40931119" y3="-2.88576232" z3="4.4283446">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.34094864" y3="-1.745388" z3="-3.90906284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47074362" y3="-1.3372189" z3="-3.00733313">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33488056" y3="3.71388016" z3="-1.03812126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1310128" y3="-2.98885712" z3="-1.71031257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91735578" y3="-3.16155665" z3="-0.56714689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.10903749" y3="-2.28305664" z3="0.36180725">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83453457" y3="-0.71554431" z3="0.612533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.68884517" y3="-0.2431751" z3="-0.97739068">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52616978" y3="0.45476756" z3="1.20954392">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.08558355" y3="-1.05199119" z3="1.96308265">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40155448" y3="-4.37163311" z3="-0.32713995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11781536" y3="-4.60619134" z3="0.87593514">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.98701466" y3="0.06502414" z3="-1.76799121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36017063" y3="0.61434853" z3="-0.78926908">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.30318138" y3="-1.07551644" z3="-1.36601619">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63375617" y3="0.55545241" z3="0.56493559">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16975247" y3="0.14639003" z3="2.20786334">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99181467" y3="1.45282728" z3="1.30877422">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.54771585" y3="-0.10301523" z3="2.29043539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.89710065" y3="-1.7187358" z3="1.62216379">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.60205942" y3="-1.5129889" z3="2.84259592">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05391947" y3="-4.02432996" z3="0.89069518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.5058617" y3="-4.34774826" z3="1.75415402">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34847703" y3="-5.67975188" z3="0.87464193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27930077" y3="-2.19703837" z3="-0.177381">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13736606" y3="-3.29645212" z3="-1.03637327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49560519" y3="-4.45566984" z3="-0.61711775">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="3.00038667" y3="-4.51024567" z3="0.68024029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14827465" y3="-3.44983995" z3="1.56941796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78115817" y3="-2.29332542" z3="1.13175092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49274697" y3="-3.22648551" z3="-2.06770216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35474901" y3="-5.29773791" z3="-1.29538791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26448114" y3="-5.69876899" z3="1.11329501">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74278351" y3="-3.52984879" z3="2.57908144">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87439194" y3="-1.44433162" z3="1.81038237">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49155388" y3="4.0198163" z3="0.05154719">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86292841" y3="3.81048383" z3="-0.00887147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40559493" y3="3.29420541" z3="-1.18046094">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61847739" y3="3.01153717" z3="-2.29401413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24737705" y3="3.21890911" z3="-2.21411299">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04299585" y3="4.38100423" z3="0.98015228">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50881055" y3="4.01975329" z3="0.84443981">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.8419942" y3="3.01097354" z3="-1.2342263">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.08153817" y3="2.62023376" z3="-3.20064854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38343203" y3="2.97344275" z3="-3.0699709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.17175391" y3="-5.90852857" z3="2.30173754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.77087633" y3="-6.40286482" z3="0.25133021">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32981145" y3="2.74541907" z3="-2.3115448">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46530051" y3="3.03971547" z3="-0.18955726">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.61913952" y3="0.16491267" z3="-2.03275164">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94354245" y3="1.41177028" z3="-1.89195032">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.79781238" y3="0.09430814" z3="-2.82569779">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.2738526" y3="1.20233366" z3="-3.48159864">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31311455" y3="-0.8670722" z3="-2.91407925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.17794881" y3="1.13575101" z3="-4.09315541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.44502805" y3="2.53325049" z3="-2.61039709">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.57834122" y3="2.43130117" z3="-3.38094752">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91369453" y3="3.48536318" z3="-2.55218936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94240331" y3="3.30640707" z3="-3.92662829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57722345" y3="3.90415824" z3="-0.25090449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.75914669" y3="5.05496193" z3="-0.05325596">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92746357" y3="3.9563413" z3="0.19670817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44565017" y3="5.10022165" z3="0.75491122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55697736" y3="3.06949959" z3="0.09884193">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48600191" y3="5.11417307" z3="1.09215907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32807458" y3="6.22868469" z3="0.51401212">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64391839" y3="6.25739366" z3="0.90400286">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69088233" y3="7.10836741" z3="0.64535037">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.07008471" y3="7.16376235" z3="1.34294282">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34911625" y3="-3.94006128" z3="-2.87021945">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53203775" y3="-4.97446938" z3="-2.54118989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22121" y3="-3.61761842" z3="-3.47003006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47379652" y3="-3.93711052" z3="-3.53898834">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69213822" y3="-1.60266317" z3="-2.09789086">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42803126" y3="-1.130347" z3="-2.77367434">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52765935" y3="-0.93792244" z3="-1.23521453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74270753" y3="-1.64816019" z3="-2.65484122">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9158,-.955,-.6885;6.598,-1.9498,-1.5584;6.0802,-.9958,-1.4199;4.771,1.4772,-1.0705;4.2845,.3106,-.5061;2.6517,2.7384,-1.1529;4.0019,2.7352,-.8499;2.3774,4.9936,-.3707;1.8056,3.853,-.8832;1.752,5.869,-.1711;2.0848,1.6137,-1.6786;3.1256,.3574,.2139;1.7102,.3842,-.6411;.6075,.7326,.2895;1.6589,-.8557,-1.5057;1.0959,-2.4756,-1.3216;2.0285,-5.5038,-6.2664;1.7611,-5.067,-5.3;1.0595,-3.9206,-2.8464;1.7286,-3.6863,-5.1558;1.4716,-5.8912,-4.2096;1.1353,-5.3118,-2.9926;1.3869,-3.0812,-3.9357;1.9614,-3.0209,-5.9908;1.5214,-6.9791,-4.3008;.9473,-5.943,-2.1199;.6558,-3.3698,-1.6031;-.3432,-3.8524,-.856;-.6857,-4.8555,-1.1231;-.3787,-3.548,.5919;-.4101,-3.0686,3.3498;-.6843,-4.5817,1.4858;-.1085,-2.27,1.0904;-.1212,-2.0324,2.4605;-.6913,-4.3442,2.8591;-.8747,-5.5906,1.1078;.0987,-1.431,.4252;.1041,-1.0237,2.8172;-.8958,-5.1676,3.5484;-.4093,-2.8858,4.4283;1.3409,-1.7454,-3.9091;1.4707,-1.3372,-3.0073;.3349,3.7139,-1.0381;-2.131,-2.9889,-1.7103;-2.9174,-3.1616,-.5671;-3.109,-2.2831,.3618;-3.8345,-.7155,.6125;-4.6888,-.2432,-.9774;-2.5262,.4548,1.2095;-5.0856,-1.052,1.9631;-3.4016,-4.3716,-.3271;-4.1178,-4.6062,.8759;-3.987,.065,-1.768;-5.3602,.6143,-.7893;-5.3032,-1.0755,-1.366;-1.6338,.5555,.5649;-2.1698,.1464,2.2079;-2.9918,1.4528,1.3088;-5.5477,-.103,2.2904;-5.8971,-1.7187,1.6222;-4.6021,-1.513,2.8426;-5.0539,-4.0243,.8907;-3.5059,-4.3477,1.7542;-4.3485,-5.6798,.8746;4.2793,-2.197,-.1774;4.1374,-3.2965,-1.0364;3.4956,-4.4557,-.6171;3.0004,-4.5102,.6802;3.1483,-3.4498,1.5694;3.7812,-2.2933,1.1318;4.4927,-3.2265,-2.0677;3.3547,-5.2977,-1.2954;2.2645,-5.6988,1.1133;2.7428,-3.5298,2.5791;3.8744,-1.4443,1.8104;-.4916,4.0198,.0515;-1.8629,3.8105,-.0089;-2.4056,3.2942,-1.1805;-1.6185,3.0115,-2.294;-.2474,3.2189,-2.2141;-.043,4.381,.9802;-2.5088,4.0198,.8444;-3.842,3.011,-1.2342;-2.0815,2.6202,-3.2006;.3834,2.9734,-3.07;2.1718,-5.9085,2.3017;1.7709,-6.4029,.2513;-4.3298,2.7454,-2.3115;-4.4653,3.0397,-.1896;6.6191,.1649,-2.0328;5.9435,1.4118,-1.892;7.7978,.0943,-2.8257;8.2739,1.2023,-3.4816;8.3131,-.8671,-2.9141;9.1779,1.1358,-4.0932;6.445,2.5333,-2.6104;7.5783,2.4313,-3.3809;5.9137,3.4854,-2.5522;7.9424,3.3064,-3.9266;4.5772,3.9042,-.2509;3.7591,5.055,-.0533;5.9275,3.9563,.1967;6.4457,5.1002,.7549;6.557,3.0695,.0988;7.486,5.1142,1.0922;4.3281,6.2287,.514;5.6439,6.2574,.904;3.6909,7.1084,.6454;6.0701,7.1638,1.3429;-2.3491,-3.9401,-2.8702;-2.532,-4.9745,-2.5412;-3.2212,-3.6176,-3.47;-1.4738,-3.9371,-3.539;-1.6921,-1.6027,-2.0979;-2.428,-1.1303,-2.7737;-1.5277,-.9379,-1.2352;-.7427,-1.6482,-2.6548;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662931585195</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000299667426 0.000062933662 0.023557477056 0.005516010342</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001501664717 0.001001109811</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057140863 -0.000046826 0.000069453 0.000128415 0.000261861 0.000361971 0.000404805 0.000515807 0.000705685 0.000778451 0.000910781 0.001009558 0.001177633 0.001266224 0.001374131 0.001472389 0.001551794 0.001701622 0.001767225 0.002050991 0.002305576 0.002602767 0.002793127 0.003054188 0.003169041 0.003670124 0.003906165 0.004486212 0.004691147 0.004851967 0.005152148 0.005279238 0.005994010 0.006326520 0.006495999 0.006720473 0.006941631 0.007390984 0.008183965 0.008613954 0.008806009 0.009361819 0.009752908 0.009900552 0.010965668 0.011219008 0.011896939 0.012637758 0.013283052 0.013619719 0.013976078 0.014646449 0.014880734 0.015426895 0.015860129 0.015981047 0.016821695 0.018651945 0.019247912 0.019445378 0.020200871 0.020539602 0.021539684 0.021746754 0.022466737 0.022814868 0.023590456 0.023757646 0.024608314 0.025908810 0.026396173 0.027088845 0.027168518 0.027738431 0.028321139 0.028823208 0.029633428 0.031370814 0.031583476 0.034278194 0.034840615 0.036049483 0.039105441 0.039698304 0.042016867 0.045486530 0.046114521 0.046682452 0.048866520 0.049702435 0.050098004 0.050837767 0.051555390 0.052229480 0.052296279 0.052422586 0.053042619 0.053652378 0.055015869 0.056114679 0.056451808 0.056673461 0.056883248 0.057048774 0.057826393 0.058658306 0.059301979 0.059843196 0.061347262 0.062176698 0.062991725 0.064352334 0.064662582 0.065142518 0.066076643 0.067623299 0.067849680 0.069033673 0.070203608 0.070902628 0.072066577 0.072522264 0.072952619 0.073250293 0.078654131 0.080199392 0.081718109 0.082483303 0.083477895 0.084624323 0.089168004 0.089523126 0.089839756 0.091348695 0.093349419 0.094590980 0.095512085 0.096302999 0.096880520 0.098617119 0.100184363 0.100709677 0.102824916 0.104011143 0.104807532 0.107025960 0.109730282 0.111119011 0.112548902 0.112993014 0.114038199 0.115060176 0.117024622 0.117454738 0.118630269 0.119189901 0.120697339 0.122248554 0.125091223 0.125888970 0.128774107 0.129100651 0.131134742 0.133900607 0.137074548 0.137985794 0.138636054 0.139837287 0.140402032 0.143422484 0.144528085 0.145930111 0.146820498 0.152000885 0.153597499 0.154095522 0.159279756 0.160827075 0.168582227 0.171488238 0.176711291 0.179250626 0.181692954 0.184542293 0.189225583 0.190800812 0.192002654 0.201395203 0.202262706 0.206379035 0.206973030 0.207278484 0.212511726 0.213046728 0.215664289 0.216991147 0.220411688 0.220931495 0.224622574 0.225220966 0.227211405 0.231921778 0.234643447 0.236287786 0.238620519 0.246334366 0.248438917 0.252824842 0.256626583 0.257252294 0.258366160 0.262590166 0.271611463 0.282941395 0.292087737 0.300176542 0.300283270 0.301140946 0.307225332 0.307816430 0.309866316 0.320050608 0.321434821 0.326516056 0.330963617 0.336697535 0.347832708 0.352063011 0.355654569 0.360873728 0.362173567 0.364161180 0.384577441 0.408171019 0.414403591 0.430326700 0.431415765 0.435510986 0.451178660 0.465294267 0.475741398 0.479048641 0.480532633 0.486981685 0.498908360 0.503901091 0.515257077 0.518114729 0.544125000 0.566953419 0.567813008 0.586952139 0.591739616 0.606130795 0.644307600 0.645887812 0.668170265 0.675660493 0.687435420 0.703454980 0.704207185 0.704447085 0.711896822 0.717422551 0.734401349 0.738046450 0.739810549 0.746938527 0.750958739 0.771640986 0.776018519 0.809441904 0.821907779 0.824343442 0.828959948 0.834358479 0.848415328 0.849627899 0.851455253 0.854861280 0.863562730 0.867481762 0.876022635 0.887599318 0.891408294 0.892386618 0.893808937 0.902144482 0.910667091 0.917978208 0.922662394 0.924571497 0.932053531 0.936471135 0.956189010 0.962590418 0.965411871 0.970141739 0.976979934 0.982589742 0.998873070 1.013129351 1.016333639 1.022036657 1.040377406 1.055740660 1.071634911 1.073199923 1.080773984 1.087642794 1.108773622 1.110454152 1.118331876 1.119324320 1.122647117 1.124062916 1.141969055 1.150200745 1.161787337 1.170212918 1.177628537 1.189114051 1.200845970 1.222237214 1.234297252 1.258322044 1.296593954 1.299991369 1.314826711 1.326481692 1.327494892 1.330399826 1.331498901 1.334853069 1.342671785 1.349321351 1.369288107 1.380026022 1.381355165 1.382037222 1.429461686 1.512147099 1.558003570 1.684875230 1.922710402</array>
            </module>
            <module cmlx:templateRef="geometry.cycle">
               <scalar cmlx:templateRef="iter" dataType="xsd:integer" dictRef="cc:cycleNumber">324</scalar>
               <module cmlx:templateRef="molecule">
                  <molecule cmlx:templateRef="atom" id="molecule">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.91561241" y3="-0.95470406" z3="-0.68556618">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.5994034" y3="-1.95088299" z3="-1.55098811">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.08191498" y3="-0.99643215" z3="-1.41395729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77309594" y3="1.47742045" z3="-1.06852092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28457524" y3="0.31118266" z3="-0.50488552">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65447522" y3="2.73934633" z3="-1.15669377">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00394372" y3="2.73588035" z3="-0.85069238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37908566" y3="4.99544441" z3="-0.37763389">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80803559" y3="3.85428954" z3="-0.88973131">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75343419" y3="5.87123299" z3="-0.17978829">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08831847" y3="1.61448956" z3="-1.68279604">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.12416334" y3="0.35857857" z3="0.21246723">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.710584" y3="0.38574395" z3="-0.6455879">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60597072" y3="0.73502235" z3="0.28245384">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.66058693" y3="-0.85439772" z3="-1.51002914">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09414383" y3="-2.4723252" z3="-1.32509855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02237132" y3="-5.49992819" z3="-6.27090744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.75570096" y3="-5.06325876" z3="-5.30420626">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05609412" y3="-3.91710596" z3="-2.84989814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.7215504" y3="-3.68245251" z3="-5.16031201">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.46885989" y3="-5.88750322" z3="-4.2132374">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13348235" y3="-5.30831876" z3="-2.99586795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38082785" y3="-3.07761597" z3="-3.93989685">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.95231012" y3="-3.01704466" z3="-5.99586932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.51995198" y3="-6.97540463" z3="-4.30429024">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94735129" y3="-5.93948704" z3="-2.12275004">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65336685" y3="-3.36638006" z3="-1.60636531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34479297" y3="-3.84928539" z3="-0.85823594">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68731606" y3="-4.85255598" z3="-1.12501091">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.37882798" y3="-3.54483374" z3="0.58973363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.40840416" y3="-3.06494563" z3="3.34749454">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.68389037" y3="-4.57843905" z3="1.48391718">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10819625" y3="-2.26673595" z3="1.0877654">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.11988072" y3="-2.02896399" z3="2.45780773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.6900243" y3="-4.34064948" z3="2.85716497">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.87476394" y3="-5.58723347" z3="1.10613276">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.09856116" y3="-1.42775746" z3="0.42228254">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10590595" y3="-1.02028538" z3="2.81432896">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.89396782" y3="-5.16400418" z3="3.54682368">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.40674546" y3="-2.88198991" z3="4.42599631">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33283545" y3="-1.74178052" z3="-3.91317854">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.46607249" y3="-1.33391169" z3="-3.0118366">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33752648" y3="3.71416405" z3="-1.04603716">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.1333935" y3="-2.98587347" z3="-1.7098814">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91881723" y3="-3.16264609" z3="-0.56674881">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.1104556" y3="-2.28731426" z3="0.36518027">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83622001" y3="-0.72100274" z3="0.62143729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.70160031" y3="-0.25063143" z3="-0.96303998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.52714244" y3="0.45328694" z3="1.20970181">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.076681" y3="-1.06066291" z3="1.98094126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40181969" y3="-4.37382834" z3="-0.33017292">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.11774926" y3="-4.61253223" z3="0.87222217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00454813" y3="0.05094228" z3="-1.76047614">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36680717" y3="0.6112138" z3="-0.77303628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32324889" y3="-1.08145611" z3="-1.34322599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63687952" y3="0.55346805" z3="0.56206467">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16705387" y3="0.14908821" z3="2.20799531">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99429459" y3="1.45091097" z3="1.30697145">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53850662" y3="-0.11298695" z3="2.31236708">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88915922" y3="-1.72918953" z3="1.64572126">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58553924" y3="-1.52105634" z3="2.8565151">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05436929" y3="-4.03148829" z3="0.88877456">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.50605546" y3="-4.35633299" z3="1.7511575">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.34750998" y3="-5.6863045" z3="0.86773833">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27736381" y3="-2.1963736" z3="-0.17579238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13496225" y3="-3.29497531" z3="-1.03566966">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49259639" y3="-4.45422599" z3="-0.61736545">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99743914" y3="-4.50965829" z3="0.67997931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.1453946" y3="-3.44986769" z3="1.56986234">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.7786001" y3="-2.29317366" z3="1.13302157">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49073261" y3="-3.22436684" z3="-2.06681134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35159043" y3="-5.2958842" z3="-1.29620356">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26166347" y3="-5.69857636" z3="1.11226443">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.73970439" y3="-3.53050044" z3="2.57939372">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87194413" y3="-1.4445865" z3="1.8121169">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.48985458" y3="4.01918289" z3="0.04316484">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86079253" y3="3.80713339" z3="-0.01760998">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.40200369" y3="3.28876164" z3="-1.18895845">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61400158" y3="3.00725145" z3="-2.30219395">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24338361" y3="3.21775628" z3="-2.22206921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04228077" y3="4.38149947" z3="0.97180603">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50736097" y3="4.01558119" z3="0.83537383">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83772468" y3="3.00186839" z3="-1.2426917">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07596766" y3="2.61422872" z3="-3.20863458">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38815557" y3="2.97322427" z3="-3.07762137">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16920893" y3="-5.90929705" z3="2.3005677">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.7678862" y3="-6.40203016" z3="0.24984961">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.32385471" y3="2.72939194" z3="-2.31908007">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46222924" y3="3.03492974" z3="-0.19885215">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.62321534" y3="0.16384542" z3="-2.02544608">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94785104" y3="1.41109819" z3="-1.8868227">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80419917" y3="0.09238501" z3="-2.81487869">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.28283832" y3="1.19999972" z3="-3.46956963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.3192396" y3="-0.86931523" z3="-2.90145996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18879" y3="1.13280072" z3="-4.07832479">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.45202025" y3="2.53207826" z3="-2.60419801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58761388" y3="2.42934214" z3="-3.3713107">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.92106458" y3="3.48453514" z3="-2.5478125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.95376639" y3="3.3041471" z3="-3.9160773">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57831277" y3="3.90542006" z3="-0.25179678">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76023347" y3="5.05678488" z3="-0.05758615">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92757938" y3="3.95773874" z3="0.19873825">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44503237" y3="5.10224013" z3="0.75629942">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55697006" y3="3.0705414" z3="0.10343523">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48470933" y3="5.11626591" z3="1.09570408">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32840017" y3="6.23114093" z3="0.50911886">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.6434339" y3="6.25995263" z3="0.90186337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69128256" y3="7.11128922" z3="0.63771431">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.069021" y3="7.16685044" z3="1.34024097">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.35105792" y3="-3.93420983" z3="-2.87221338">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53131658" y3="-4.96996154" z3="-2.54606541">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22462027" y3="-3.61186801" z3="-3.46994703">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47663606" y3="-3.92749156" z3="-3.54212518">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69630377" y3="-1.5981849" z3="-2.09411018">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.43297805" y3="-1.12508381" z3="-2.76852089">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.53228244" y3="-0.9353073" z3="-1.22998447">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74695452" y3="-1.64144623" z3="-2.65145634">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9156,-.9547,-.6856;6.5994,-1.9509,-1.551;6.0819,-.9964,-1.414;4.7731,1.4774,-1.0685;4.2846,.3112,-.5049;2.6545,2.7393,-1.1567;4.0039,2.7359,-.8507;2.3791,4.9954,-.3776;1.808,3.8543,-.8897;1.7534,5.8712,-.1798;2.0883,1.6145,-1.6828;3.1242,.3586,.2125;1.7106,.3857,-.6456;.606,.735,.2825;1.6606,-.8544,-1.51;1.0941,-2.4723,-1.3251;2.0224,-5.4999,-6.2709;1.7557,-5.0633,-5.3042;1.0561,-3.9171,-2.8499;1.7216,-3.6825,-5.1603;1.4689,-5.8875,-4.2132;1.1335,-5.3083,-2.9959;1.3808,-3.0776,-3.9399;1.9523,-3.017,-5.9959;1.52,-6.9754,-4.3043;.9474,-5.9395,-2.1228;.6534,-3.3664,-1.6064;-.3448,-3.8493,-.8582;-.6873,-4.8526,-1.125;-.3788,-3.5448,.5897;-.4084,-3.0649,3.3475;-.6839,-4.5784,1.4839;-.1082,-2.2667,1.0878;-.1199,-2.029,2.4578;-.69,-4.3406,2.8572;-.8748,-5.5872,1.1061;.0986,-1.4278,.4223;.1059,-1.0203,2.8143;-.894,-5.164,3.5468;-.4067,-2.882,4.426;1.3328,-1.7418,-3.9132;1.4661,-1.3339,-3.0118;.3375,3.7142,-1.046;-2.1334,-2.9859,-1.7099;-2.9188,-3.1626,-.5667;-3.1105,-2.2873,.3652;-3.8362,-.721,.6214;-4.7016,-.2506,-.963;-2.5271,.4533,1.2097;-5.0767,-1.0607,1.9809;-3.4018,-4.3738,-.3302;-4.1177,-4.6125,.8722;-4.0045,.0509,-1.7605;-5.3668,.6112,-.773;-5.3232,-1.0815,-1.3432;-1.6369,.5535,.5621;-2.1671,.1491,2.208;-2.9943,1.4509,1.307;-5.5385,-.113,2.3124;-5.8892,-1.7292,1.6457;-4.5855,-1.5211,2.8565;-5.0544,-4.0315,.8888;-3.5061,-4.3563,1.7512;-4.3475,-5.6863,.8677;4.2774,-2.1964,-.1758;4.135,-3.295,-1.0357;3.4926,-4.4542,-.6174;2.9974,-4.5097,.68;3.1454,-3.4499,1.5699;3.7786,-2.2932,1.133;4.4907,-3.2244,-2.0668;3.3516,-5.2959,-1.2962;2.2617,-5.6986,1.1123;2.7397,-3.5305,2.5794;3.8719,-1.4446,1.8121;-.4899,4.0192,.0432;-1.8608,3.8071,-.0176;-2.402,3.2888,-1.189;-1.614,3.0073,-2.3022;-.2434,3.2178,-2.2221;-.0423,4.3815,.9718;-2.5074,4.0156,.8354;-3.8377,3.0019,-1.2427;-2.076,2.6142,-3.2086;.3882,2.9732,-3.0776;2.1692,-5.9093,2.3006;1.7679,-6.402,.2498;-4.3239,2.7294,-2.3191;-4.4622,3.0349,-.1989;6.6232,.1638,-2.0254;5.9479,1.4111,-1.8868;7.8042,.0924,-2.8149;8.2828,1.2,-3.4696;8.3192,-.8693,-2.9015;9.1888,1.1328,-4.0783;6.452,2.5321,-2.6042;7.5876,2.4293,-3.3713;5.9211,3.4845,-2.5478;7.9538,3.3041,-3.9161;4.5783,3.9054,-.2518;3.7602,5.0568,-.0576;5.9276,3.9577,.1987;6.445,5.1022,.7563;6.557,3.0705,.1034;7.4847,5.1163,1.0957;4.3284,6.2311,.5091;5.6434,6.26,.9019;3.6913,7.1113,.6377;6.069,7.1669,1.3402;-2.3511,-3.9342,-2.8722;-2.5313,-4.97,-2.5461;-3.2246,-3.6119,-3.4699;-1.4766,-3.9275,-3.5421;-1.6963,-1.5982,-2.0941;-2.433,-1.1251,-2.7685;-1.5323,-.9353,-1.23;-.747,-1.6414,-2.6515;</scalar>
</formula>
</molecule>
               </module>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662932391400</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">Maximum Force|RMS Force|Maximum Displacement|RMS Displacement</array>
               <array dataType="xsd:double" dictRef="g:value" size="4">0.000272187910 0.000052541249 0.013249046103 0.003394255956</array>
               <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000300000000 0.000200000000 0.001653269613 0.001102179742</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.057140325 0.000024055 0.000051155 0.000170365 0.000258395 0.000343756 0.000405060 0.000516261 0.000705849 0.000777679 0.000908028 0.001008175 0.001175449 0.001266142 0.001370949 0.001471395 0.001551350 0.001701024 0.001767227 0.002048745 0.002304145 0.002603107 0.002791210 0.003055849 0.003159661 0.003669661 0.003907125 0.004487242 0.004689899 0.004849747 0.005150579 0.005272400 0.005993190 0.006319252 0.006497931 0.006711881 0.006938196 0.007390474 0.008183198 0.008609583 0.008805031 0.009353795 0.009749188 0.009900703 0.010966150 0.011218189 0.011896650 0.012637970 0.013273043 0.013618493 0.013975629 0.014649495 0.014883093 0.015426472 0.015858524 0.015978257 0.016824129 0.018652069 0.019246085 0.019444840 0.020201875 0.020539934 0.021539677 0.021746451 0.022467822 0.022815050 0.023594180 0.023756854 0.024611138 0.025908989 0.026372212 0.027083908 0.027163313 0.027747768 0.028297194 0.028844022 0.029646685 0.031399154 0.031583318 0.034278851 0.034843838 0.036053478 0.039105906 0.039701917 0.042017138 0.045486930 0.046112529 0.046675636 0.048865017 0.049702572 0.050096896 0.050837422 0.051555473 0.052230091 0.052296459 0.052422672 0.053043589 0.053652616 0.055015747 0.056113376 0.056450259 0.056660049 0.056868067 0.057048829 0.057827505 0.058659630 0.059303344 0.059844561 0.061347380 0.062176432 0.062992252 0.064352403 0.064671313 0.065143863 0.066075381 0.067626203 0.067849342 0.069032984 0.070178637 0.070886636 0.072061854 0.072523319 0.072950403 0.073259788 0.078652215 0.080194231 0.081712107 0.082488526 0.083476871 0.084627799 0.089171431 0.089526326 0.089839069 0.091348756 0.093349797 0.094591568 0.095512489 0.096303531 0.096880921 0.098618261 0.100182328 0.100710223 0.102825128 0.104011301 0.104809189 0.107030235 0.109738408 0.111119458 0.112551947 0.112997626 0.114038474 0.115062947 0.117024334 0.117455737 0.118629887 0.119190015 0.120697551 0.122250788 0.125091415 0.125890059 0.128775315 0.129101959 0.131139006 0.133901750 0.137080325 0.137984516 0.138637828 0.139844872 0.140403298 0.143422209 0.144526695 0.145933175 0.146820984 0.152000261 0.153598592 0.154088432 0.159266042 0.160826596 0.168582015 0.171489044 0.176716118 0.179253563 0.181695407 0.184542958 0.189226417 0.190803870 0.192002932 0.201396361 0.202263220 0.206379584 0.206973146 0.207279052 0.212511871 0.213060639 0.215666971 0.216991214 0.220409179 0.220930323 0.224622766 0.225229108 0.227212100 0.231921928 0.234645077 0.236289907 0.238622081 0.246336547 0.248439332 0.252827519 0.256627006 0.257252598 0.258366351 0.262590567 0.271611685 0.282943183 0.292090389 0.300177274 0.300283006 0.301141381 0.307226697 0.307816856 0.309866573 0.320054045 0.321438122 0.326516511 0.330963567 0.336698866 0.347837194 0.352065610 0.355654677 0.360874318 0.362173557 0.364161136 0.384578787 0.408215872 0.414399113 0.430328027 0.431401480 0.435512929 0.451179634 0.465325511 0.475742476 0.479050216 0.480534649 0.487006532 0.498908471 0.503900839 0.515259328 0.518124608 0.544129929 0.566955023 0.567821109 0.586954348 0.591739660 0.606131704 0.644309924 0.645892935 0.668171685 0.675661994 0.687437207 0.703452331 0.704212228 0.704449216 0.711909993 0.717428763 0.734402559 0.738046482 0.739813536 0.746932652 0.750960906 0.771641340 0.776020329 0.809442706 0.821909097 0.824345580 0.828960735 0.834359641 0.848417007 0.849629416 0.851458790 0.854869290 0.863564094 0.867482181 0.876023074 0.887599188 0.891404604 0.892391366 0.893808606 0.902145505 0.910666949 0.917975751 0.922660452 0.924571502 0.932053930 0.936491570 0.956190032 0.962574623 0.965412740 0.970142266 0.976975855 0.982590060 0.998882028 1.013127676 1.016333762 1.022038559 1.040382698 1.055765661 1.071657097 1.073203224 1.080784135 1.087644181 1.108798538 1.110457017 1.118332188 1.119324507 1.122648208 1.124066144 1.141971366 1.150205699 1.161787380 1.170213232 1.177631280 1.189118425 1.200846950 1.222237683 1.234297312 1.258323359 1.296601141 1.300002302 1.314831603 1.326481778 1.327495296 1.330400681 1.331499642 1.334852997 1.342674115 1.349322179 1.369290208 1.380026162 1.381355773 1.382054842 1.429461599 1.512135096 1.558003674 1.684874981 1.922704402</array>
            </module>
            <module dictRef="cc:irc" id="irc">
               <module id="irc-center">
                  <molecule cmlx:templateRef="atom" id="irc-center.0">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="4.9175753" y3="-0.9542665" z3="-0.68408421">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="6.60082306" y3="-1.95030461" z3="-1.55067152">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="6.0830632" y3="-0.99599056" z3="-1.41375449">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.77329855" y3="1.47746574" z3="-1.06911808">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="4.28621139" y3="0.31150764" z3="-0.50367815">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="2.65375872" y3="2.73811366" z3="-1.15560673">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.00369962" y3="2.73569463" z3="-0.85158147">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="2.37841192" y3="4.99509988" z3="-0.37907862">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="1.80717963" y3="3.85302565" z3="-0.88890754">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="1.75260631" y3="5.87093495" z3="-0.18140205">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.08733357" y3="1.61249207" z3="-1.67972597">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="3.1267121" y3="0.35902911" z3="0.21514273">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.71217672" y3="0.38395354" z3="-0.64128533">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.60811091" y3="0.7322144" z3="0.28773522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="1.6627385" y3="-0.85663244" z3="-1.50509974">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="1.09551117" y3="-2.47434187" z3="-1.32195461">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="2.02951179" y3="-5.49877359" z3="-6.26854522">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="1.76146999" y3="-5.06263418" z3="-5.30199385">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="1.05853219" y3="-3.91777398" z3="-2.84802128">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="1.72803507" y3="-3.68191076" z3="-5.15714587">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="1.47218859" y3="-5.88747304" z3="-4.2121256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="1.13519079" y3="-5.30893401" z3="-2.99489941">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="1.38565412" y3="-3.07772919" z3="-3.93688397">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="1.9606981" y3="-3.01604238" z3="-5.99180321">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="1.52269173" y3="-6.97534058" z3="-4.30388418">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="0.94727505" y3="-5.94057568" z3="-2.12251059">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="0.65440294" y3="-3.36774143" z3="-1.6046503">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-0.34554292" y3="-3.85027181" z3="-0.85859242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-0.68878668" y3="-4.85276126" z3="-1.12732337">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-0.38131963" y3="-3.54821912" z3="0.58985538">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-0.41633325" y3="-3.07328394" z3="3.34846103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-0.69078941" y3="-4.58271588" z3="1.48147468">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-0.10879452" y3="-2.27161917" z3="1.09084373">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-0.12317644" y3="-2.03642528" z3="2.46135806">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-0.69970857" y3="-4.34740012" z3="2.85512217">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-0.8830967" y3="-5.59032097" z3="1.10135644">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="0.10159987" y3="-1.43187465" z3="0.42749437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="0.10414123" y3="-1.02899908" z3="2.82040409">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-0.90721687" y3="-5.17150379" z3="3.54281601">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-0.41683852" y3="-2.89231959" z3="4.42730658">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="1.33861648" y3="-1.74187864" z3="-3.90931363">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="1.47051229" y3="-1.33475463" z3="-3.00738663">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="0.33653508" y3="3.71244481" z3="-1.04365696">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-2.13139292" y3="-2.983266" z3="-1.71096121">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-2.91893643" y3="-3.16083108" z3="-0.5693375">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-3.11030311" y3="-2.28697683" z3="0.3639816">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.83504806" y3="-0.7204573" z3="0.62198936">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.69946513" y3="-0.24859067" z3="-0.96251401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.5255079" y3="0.4524633" z3="1.21171401">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.07573696" y3="-1.06070779" z3="1.98086256">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-3.40454028" y3="-4.37156533" z3="-0.33589268">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-4.12338721" y3="-4.61110945" z3="0.86457796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-4.00192827" y3="0.05399212" z3="-1.75904937">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-5.36529366" y3="0.61268" z3="-0.77233492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.32028099" y3="-1.07929651" z3="-1.34402311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.63529395" y3="0.553175" z3="0.56414588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.16532728" y3="0.1467144" z3="2.20947817">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-2.99215269" y3="1.45008588" z3="1.31052404">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-5.53703572" y3="-0.11313049" z3="2.31329315">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-5.88850984" y3="-1.72850042" z3="1.6450784">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-4.58475181" y3="-1.52218542" z3="2.85593925">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-5.05922488" y3="-4.02874786" z3="0.88000072">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-3.51323821" y3="-4.35727114" z3="1.74520221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-4.35470219" y3="-5.68460057" z3="0.85797466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="4.27978696" y3="-2.19584798" z3="-0.17345676">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="4.13680241" y3="-3.29460737" z3="-1.03308196">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="3.49335941" y3="-4.45317315" z3="-0.6147092">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="2.99774668" y3="-4.50788125" z3="0.68248885">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="3.14674296" y3="-3.44818537" z3="1.57230138">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="3.78109641" y3="-2.29214699" z3="1.13542713">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="4.49259937" y3="-3.22444491" z3="-2.06424855">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="3.35159674" y3="-5.29464347" z3="-1.29349267">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="2.26033679" y3="-5.69584723" z3="1.11466759">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="2.74088895" y3="-3.52831463" z3="2.58179763">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="3.87503361" y3="-1.44349287" z3="1.81443921">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="-0.49011448" y3="4.01931163" z3="0.04556455">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="-1.86120009" y3="3.80788801" z3="-0.01416406">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-2.4033105" y3="3.28849872" z3="-1.18465689">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="-1.61600048" y3="3.00485046" z3="-2.29782801">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="-0.24520138" y3="3.21446585" z3="-2.21858203">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="-0.04186083" y3="4.38281918" z3="0.97342963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="-2.50724194" y3="4.01787574" z3="0.83883675">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-3.83930918" y3="3.00308907" z3="-1.23759761">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-2.07864725" y3="2.61100092" z3="-3.20355266">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="0.38577433" y3="2.96840787" z3="-3.0741931">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="2.16642889" y3="-5.9057947" z3="2.30299923">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="1.76686609" y3="-6.39933992" z3="0.25212963">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-4.3263138" y3="2.73160592" z3="-2.31381413">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-4.46317028" y3="3.03636247" z3="-0.19340722">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="6.6229666" y3="0.16401824" z3="-2.02699655">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="5.94699061" y3="1.41098868" z3="-1.88892104">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="7.80296405" y3="0.09243237" z3="-2.81786796">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="8.27998526" y3="1.19958628" z3="-3.4745134">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="8.31851353" y3="-0.86902443" z3="-2.90399989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="9.18516605" y3="1.13227964" z3="-4.08437686">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.4494077" y3="2.53141621" z3="-2.6083826">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="7.58402954" y3="2.42853784" z3="-3.3768792">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="5.91784203" y3="3.48353119" z3="-2.55255139">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.94881259" y3="3.30291044" z3="-3.92325502">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="4.57838325" y3="3.90629547" z3="-0.2550486">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="3.76002007" y3="5.05751616" z3="-0.06114844">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="5.92824119" y3="3.95989542" z3="0.19350257">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="6.44597028" y3="5.10543228" z3="0.74868103">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.55773847" y3="3.07298936" z3="0.09919741">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="7.48597171" y3="5.12049255" z3="1.0867874">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="4.32840555" y3="6.23292114" z3="0.50319462">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="5.64405233" y3="6.2629313" z3="0.89383593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="3.69090694" y3="7.11302024" z3="0.63219932">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="6.0697864" y3="7.1706206" z3="1.33051311">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-2.34901333" y3="-3.92904723" z3="-2.87537987">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-2.53156248" y3="-4.96509304" z3="-2.55152823">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-3.22110828" y3="-3.60403218" z3="-3.47378453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-1.47358218" y3="-3.92246086" z3="-3.54396993">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-1.69203414" y3="-1.59541938" z3="-2.09220652">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.42780077" y3="-1.11963526" z3="-2.76564835">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-1.52708484" y3="-0.93476646" z3="-1.22662617">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-0.74259914" y3="-1.63916326" z3="-2.64949748">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9176,-.9543,-.6841;6.6008,-1.9503,-1.5507;6.0831,-.996,-1.4138;4.7733,1.4775,-1.0691;4.2862,.3115,-.5037;2.6538,2.7381,-1.1556;4.0037,2.7357,-.8516;2.3784,4.9951,-.3791;1.8072,3.853,-.8889;1.7526,5.8709,-.1814;2.0873,1.6125,-1.6797;3.1267,.359,.2151;1.7122,.384,-.6413;.6081,.7322,.2877;1.6627,-.8566,-1.5051;1.0955,-2.4743,-1.322;2.0295,-5.4988,-6.2685;1.7615,-5.0626,-5.302;1.0585,-3.9178,-2.848;1.728,-3.6819,-5.1571;1.4722,-5.8875,-4.2121;1.1352,-5.3089,-2.9949;1.3857,-3.0777,-3.9369;1.9607,-3.016,-5.9918;1.5227,-6.9753,-4.3039;.9473,-5.9406,-2.1225;.6544,-3.3677,-1.6047;-.3455,-3.8503,-.8586;-.6888,-4.8528,-1.1273;-.3813,-3.5482,.5899;-.4163,-3.0733,3.3485;-.6908,-4.5827,1.4815;-.1088,-2.2716,1.0908;-.1232,-2.0364,2.4614;-.6997,-4.3474,2.8551;-.8831,-5.5903,1.1014;.1016,-1.4319,.4275;.1041,-1.029,2.8204;-.9072,-5.1715,3.5428;-.4168,-2.8923,4.4273;1.3386,-1.7419,-3.9093;1.4705,-1.3348,-3.0074;.3365,3.7124,-1.0437;-2.1314,-2.9833,-1.711;-2.9189,-3.1608,-.5693;-3.1103,-2.287,.364;-3.835,-.7205,.622;-4.6995,-.2486,-.9625;-2.5255,.4525,1.2117;-5.0757,-1.0607,1.9809;-3.4045,-4.3716,-.3359;-4.1234,-4.6111,.8646;-4.0019,.054,-1.759;-5.3653,.6127,-.7723;-5.3203,-1.0793,-1.344;-1.6353,.5532,.5641;-2.1653,.1467,2.2095;-2.9922,1.4501,1.3105;-5.537,-.1131,2.3133;-5.8885,-1.7285,1.6451;-4.5848,-1.5222,2.8559;-5.0592,-4.0287,.88;-3.5132,-4.3573,1.7452;-4.3547,-5.6846,.858;4.2798,-2.1958,-.1735;4.1368,-3.2946,-1.0331;3.4934,-4.4532,-.6147;2.9977,-4.5079,.6825;3.1467,-3.4482,1.5723;3.7811,-2.2921,1.1354;4.4926,-3.2244,-2.0642;3.3516,-5.2946,-1.2935;2.2603,-5.6958,1.1147;2.7409,-3.5283,2.5818;3.875,-1.4435,1.8144;-.4901,4.0193,.0456;-1.8612,3.8079,-.0142;-2.4033,3.2885,-1.1847;-1.616,3.0049,-2.2978;-.2452,3.2145,-2.2186;-.0419,4.3828,.9734;-2.5072,4.0179,.8388;-3.8393,3.0031,-1.2376;-2.0786,2.611,-3.2036;.3858,2.9684,-3.0742;2.1664,-5.9058,2.303;1.7669,-6.3993,.2521;-4.3263,2.7316,-2.3138;-4.4632,3.0364,-.1934;6.623,.164,-2.027;5.947,1.411,-1.8889;7.803,.0924,-2.8179;8.28,1.1996,-3.4745;8.3185,-.869,-2.904;9.1852,1.1323,-4.0844;6.4494,2.5314,-2.6084;7.584,2.4285,-3.3769;5.9178,3.4835,-2.5526;7.9488,3.3029,-3.9233;4.5784,3.9063,-.255;3.76,5.0575,-.0611;5.9282,3.9599,.1935;6.446,5.1054,.7487;6.5577,3.073,.0992;7.486,5.1205,1.0868;4.3284,6.2329,.5032;5.6441,6.2629,.8938;3.6909,7.113,.6322;6.0698,7.1706,1.3305;-2.349,-3.929,-2.8754;-2.5316,-4.9651,-2.5515;-3.2211,-3.604,-3.4738;-1.4736,-3.9225,-3.544;-1.692,-1.5954,-2.0922;-2.4278,-1.1196,-2.7656;-1.5271,-.9348,-1.2266;-.7426,-1.6392,-2.6495;</scalar>
</formula>
</molecule>
                  <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" id="irc-center.0" units="nonsi:hartree">-3667.662933160133</scalar>
                  <scalar dictRef="cc:ircStep" id="step">0</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">FORWARD</scalar>
               </module>
               <module cmlx:templateRef="irc-path">
                  <scalar cmlx:templateRef="direction" dataType="xsd:string" dictRef="g:ircDirection">BACKWARD</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module dictRef="cc:vibrations">
                     <array dataType="xsd:integer" dictRef="x:serial" size="345">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="345">-283.19604187 11.34678481 17.63135556 25.74230554 26.94974619 30.60262293 34.55982316 39.66835975 45.82309085 49.23211916 53.22857771 55.44039407 57.99678333 61.02668344 64.60248914 67.56364901 72.82047582 75.94914449 79.52208295 81.17101393 83.71495472 90.70021008 92.45814646 94.79693977 99.42249149 108.87990441 111.86155968 118.53971210 128.70643286 130.00177422 131.66556690 136.04382375 142.19929452 155.84396796 159.07005990 161.29169714 165.69963267 168.82838703 170.68919036 183.15643990 184.73694137 189.27318286 193.84897546 195.34763097 201.12279881 202.56579980 213.21868509 215.60241509 221.05471568 229.03680316 233.35701832 236.44703173 241.66803180 249.08816318 251.17205669 255.65314261 256.59488664 273.68246554 280.10304562 288.43438875 292.26886959 301.44790582 316.76943930 324.28089302 337.52088942 339.73544688 345.63773846 350.79502175 358.59890580 363.96428814 371.00756367 387.04555456 393.58967445 406.07773170 417.89120360 423.32514854 426.71159553 428.48467060 438.06870768 447.67592259 451.86059977 462.69851219 467.27569780 476.22099595 477.71844703 482.23815740 489.12699818 505.38510204 511.68327658 517.83551445 524.84789038 537.98541746 545.24758783 557.89125215 561.25369383 563.39661066 571.23235585 574.43785353 577.03728751 582.31276047 584.77272676 585.97073547 602.48293308 604.45460783 609.23591923 618.62370618 622.23327672 636.71833909 640.40939021 641.83203245 645.80474349 654.18757133 657.62879414 673.81009051 681.23315482 694.20469760 697.60004326 707.17467568 717.42610712 718.05484736 722.22257417 730.49334549 732.16268894 734.79740082 752.31112386 756.24020289 766.58482682 768.87732373 774.30744087 781.79849399 782.75162677 783.14476634 785.85885070 788.17870285 801.00280086 802.44652274 803.61619016 806.22832120 811.41059014 816.76527035 824.80728995 848.93558072 853.99470607 860.69079940 865.15510097 868.69183593 869.25626107 874.94170702 880.71036626 882.50259308 885.34834846 886.68837008 888.85776416 889.46375885 891.82109819 894.82892805 901.75647634 903.41426188 904.68422993 907.72052046 908.23028298 916.93160623 918.95153908 950.47982703 953.02833605 969.68497772 975.54818641 980.53831505 983.71894316 990.27555280 1005.60811188 1008.10994371 1010.17548491 1011.45263763 1012.44240934 1015.56732552 1016.16207246 1017.43674438 1026.41944185 1027.91664588 1028.30824852 1033.38713571 1034.85842348 1038.05471942 1039.89985207 1051.37067415 1052.03980831 1060.11167308 1065.80013237 1072.90027021 1076.31819966 1080.64361972 1086.57155313 1114.61632470 1118.34381528 1123.06986455 1130.70521336 1133.88103150 1139.20847149 1143.28446463 1155.57891250 1166.96827102 1167.08710850 1175.44485847 1176.08784551 1177.76967555 1183.93015801 1186.73330117 1190.68352325 1205.50974038 1210.44425264 1215.20238283 1218.00236291 1223.43316830 1231.51642542 1232.77149036 1254.22597691 1256.77521602 1271.83316334 1275.26498221 1291.56252667 1292.45972114 1304.12762216 1305.37606018 1307.85120252 1312.05534116 1314.00352356 1319.16993360 1320.45426254 1323.63052791 1326.79326500 1332.13277553 1339.12337534 1351.79464713 1358.47647622 1371.09221841 1376.82679658 1379.04961175 1382.28446855 1388.42863801 1398.10492088 1410.83287633 1427.05062262 1428.94600952 1431.04637884 1437.80532820 1440.74160252 1441.84283165 1445.69067443 1449.10512465 1450.69471755 1453.97420437 1459.61372107 1460.85978717 1461.13400115 1465.30401786 1466.04054241 1474.23927360 1479.87351422 1487.28306781 1490.09039567 1490.78693001 1491.10283661 1494.59402521 1495.64829016 1500.03380326 1503.70769918 1505.24533245 1514.02318329 1518.29508803 1521.96681233 1533.58870899 1534.02378787 1551.93724321 1558.99478725 1561.62206414 1571.53225156 1572.82579545 1579.27419144 1623.14773171 1655.96419444 1662.87723256 1663.51118005 1672.53258429 1673.50515371 1679.87366396 1687.43007996 1690.40857904 1697.44998977 1701.21555095 1702.24744853 1705.22570059 1710.81015089 1723.09430164 1727.39586373 1742.83435502 1743.57968679 3029.56071993 3030.92124252 3031.03766057 3039.03274790 3045.92520791 3060.32966886 3121.86276515 3128.74668672 3128.90453776 3130.24689705 3134.42261620 3134.85072937 3135.95972494 3154.31531306 3162.14803415 3163.22112370 3164.46273858 3169.26721776 3189.76657801 3190.30062701 3192.04078435 3194.01341729 3195.07926494 3195.33653686 3198.19692156 3202.14428928 3202.38727190 3202.75123847 3206.86528260 3211.56091685 3213.92490547 3216.00101065 3216.27542510 3216.66633851 3217.77778901 3219.12770178 3222.80864148 3225.91518339 3230.92889698 3233.40548668 3235.59087135 3236.87665408 3249.11416335 3249.34924717 3249.95697132 3250.79322729 3254.66449634 3263.19247000</array>
                     <array dataType="xsd:double" dictRef="cc:redmass" size="345">8.31445825 6.31232073 5.42887680 6.32144255 8.12539560 5.98104723 6.49604096 6.54247007 5.32374830 4.67053859 5.62469131 4.90540033 6.09629361 6.53730610 5.65704316 4.40739465 5.08926591 6.38900447 4.88371824 5.81413346 5.65632277 5.17579880 5.87887394 6.76944090 6.11243637 5.28301658 4.50554640 5.64684540 4.40670223 6.13784671 4.79557515 4.40980754 5.93459129 4.66415750 1.69608558 4.03945284 1.47150471 2.24810940 2.08353627 3.92374483 2.34308295 2.49993638 4.12775235 1.60233086 1.68913642 3.59879617 2.82755465 2.75467825 3.47063296 6.42789430 3.00177677 2.30529679 2.27984587 5.21284891 5.06568476 6.29824046 1.64437581 6.02004702 3.12910739 4.31664181 4.96323041 4.36004605 5.24112165 7.92728737 2.24954758 4.14088839 3.19382115 5.61506643 5.40128634 6.23038515 2.58360561 6.64930681 2.15905000 7.38380409 4.57453739 3.70715283 2.94375374 3.82603195 3.30285928 8.27653438 8.78640716 5.75991025 5.72997475 4.53711801 4.82817443 4.74994776 6.72428678 5.82474939 6.43498357 5.47792165 3.83912388 4.21146413 4.32763198 4.94286053 4.02721581 4.51321745 5.08311827 4.82977351 4.36201011 3.95240390 4.82879163 4.55469293 6.57119982 6.40985162 6.30787418 3.68192731 4.76313513 6.02345717 6.94356151 7.17860753 7.04960242 3.60320193 5.64862237 5.42828842 5.42082256 6.07643665 1.18486470 1.86886132 6.94560923 7.31073226 1.69290530 1.82449337 3.47275121 3.53671133 2.96524960 5.28728326 2.39381567 1.95441613 3.63508403 5.47318051 1.33065501 1.63058496 1.39117094 1.37010983 1.82016480 2.59889353 2.31651289 4.93060068 6.43561697 3.83349415 4.29717423 3.44273869 4.29579845 1.32201197 1.72894188 4.36744186 1.36171465 3.87624088 1.74500554 2.84432427 1.65796151 2.43372253 2.18844672 2.01464347 1.79006351 1.74235420 1.53247902 2.23605457 1.61425540 7.56109269 2.68649038 2.88586906 4.88981855 1.66917117 1.65653650 1.43396108 6.78518536 1.36843872 1.36622876 2.23490075 1.43729746 1.42497425 2.04910515 1.43549338 2.22152757 1.36624683 1.31481135 1.77471893 1.34148177 1.64210707 1.78665969 2.98003985 1.43953144 1.37405319 2.59373173 1.40079038 2.66190826 1.99533236 1.36748777 2.01259716 2.07352763 1.81684982 2.89746286 3.82318396 1.53580829 7.24228080 1.22657103 1.71206391 1.25337652 1.46839948 2.07460754 1.63962946 1.84088322 1.09855894 1.26990710 1.09240139 1.25843599 1.27426744 1.58902277 1.12242146 1.48125245 1.45344239 1.51100559 2.00557630 1.67329701 1.67392395 2.43085741 1.87951395 2.02979872 3.53498372 3.62172343 2.69151456 2.79670423 1.29109696 2.82671028 1.28165771 2.25235782 2.06169652 1.47467695 1.67487243 1.52525437 2.77866839 2.09063359 2.33895832 1.55918153 3.05427470 5.49785646 3.80498358 4.35755960 4.41120079 4.79789602 1.59359357 1.43885759 3.51860584 1.51821781 1.07771158 4.64961153 6.01299491 1.14046878 1.11597161 1.19197337 1.08421931 1.22620414 3.25709153 3.19387351 1.07243267 3.20050300 1.83579426 1.14838862 5.70761320 1.27373718 3.09422353 1.17745281 3.53508036 1.05674380 1.07042041 3.55775772 3.31967228 4.08539478 2.07825109 1.13711804 2.03094293 2.44863181 2.46775017 3.10993838 3.02618164 3.31495259 4.19767033 4.42874605 3.14435777 4.90403621 7.91410720 8.35487222 8.64513657 8.49392305 5.97271283 7.08064622 6.92887221 3.27210385 6.72032868 6.83008701 5.20387886 5.56902556 6.74481635 7.14074835 12.32302367 12.66569814 1.03853285 1.03769121 1.04494459 1.04036455 1.04421737 1.03232945 1.09550951 1.10249148 1.10293355 1.10230539 1.09704480 1.10260362 1.10203497 1.07807652 1.10931401 1.10538949 1.09997212 1.10200361 1.08779768 1.08824426 1.09147887 1.09212980 1.08746430 1.10858442 1.08609299 1.09093730 1.09134169 1.09138230 1.09197382 1.09161986 1.09196467 1.09460455 1.09693903 1.09729978 1.09163277 1.09492932 1.09932533 1.09929088 1.09603798 1.09120901 1.09481782 1.09032803 1.09518660 1.09077021 1.09683258 1.09658899 1.09470576 1.08367741</array>
                     <array dataType="xsd:double" dictRef="cc:displacement" size="121095">0.0022397809 -0.0030617121 -0.0013432166 0.0039655181 -0.0043540032 -0.0002162333 0.0014117165 -0.0036815108 -0.0014189267 -0.0006813026 -0.0013567963 -0.0004323120 0.0003507498 -0.0035844429 -0.0014272489 -0.0035822008 -0.0032060729 -0.0004357543 -0.0023768342 -0.0014200920 -0.0008777964 -0.0030784614 -0.0041208348 -0.0029968534 -0.0044458042 -0.0029675202 -0.0023948863 -0.0047176635 -0.0040128432 -0.0044392083 -0.0068133500 -0.0124389685 -0.0025052058 -0.0069079879 -0.0095130351 -0.0043478964 -0.0009442230 -0.0008678270 -0.0004768306 -0.0061108405 -0.0139255647 0.0027436565 -0.0186346761 -0.0170953722 0.0049636066 0.0770552757 -0.0299379399 0.0322800697 0.0007043908 0.0173695660 0.0052629740 0.0023247351 0.0161407967 0.0056833008 0.0173770030 -0.0101041217 -0.0081537502 -0.0029983715 0.0144512825 -0.0026395898 0.0051243508 0.0026065708 0.0094719938 0.0068835658 -0.0039088285 0.0069533624 0.0174174729 0.0142577351 0.0049460575 -0.0085413192 0.0162792817 -0.0057386553 0.0122894380 -0.0015805659 0.0112610938 0.0221127160 -0.0234077782 0.0116874271 0.0369821838 -0.0157711280 0.0240140382 0.1762192974 -0.4084519719 0.2513524903 0.0578370951 -0.0539527607 -0.0236372382 0.0504445733 -0.0773356800 0.0635139987 -0.0054863416 0.0189823443 0.0039866397 -0.0104211436 -0.0076036912 0.0350172523 0.0283744168 -0.0229117304 0.0217900449 -0.0036076966 0.0206446946 0.0059411965 -0.0183973253 0.0233945330 0.0184327348 -0.0116672055 -0.0006301558 0.0308862986 0.0208825473 -0.0298673670 0.0090129213 -0.0274799436 0.0528106871 -0.0013304923 -0.0363415238 0.0630686185 0.0196857596 -0.0124826494 0.0392782251 -0.0012180133 0.0193962641 -0.0080208212 0.0023632697 0.0069853932 0.0410491275 -0.0027538107 -0.0023825913 0.0002507438 -0.0019711394 -0.2096080677 0.4417508567 -0.2674637698 0.0029941812 0.0679084618 -0.0922664470 0.0680935480 -0.0173411576 0.0821932344 -0.0306123682 -0.0507619481 -0.0044768962 -0.0060931322 -0.0054671956 0.0025722198 -0.0154044376 0.0252925125 -0.0025756321 -0.0007305837 0.0136390677 0.0022137380 -0.0214226987 -0.0160713163 0.0096462202 0.0173932800 0.0159571882 -0.0103735338 -0.0060632940 -0.0035634451 0.0012618035 -0.0140201993 -0.0059694226 0.0094102175 0.0006491877 -0.0158443357 -0.0062483014 -0.0125572891 0.0444822921 -0.0156206375 -0.0032691128 0.0104533941 -0.0061587912 -0.0292874884 0.0281586910 0.0153912693 0.0023811056 0.0150718736 -0.0089187286 -0.0045182511 0.0054212677 0.0097534641 -0.0025208646 0.0183302100 0.0054869183 -0.0139475238 0.0114539017 -0.0157141747 -0.0050493852 0.0661522488 0.0101592878 0.0083887287 0.0205237410 0.0359610377 0.0026556277 -0.0011199864 -0.0003953854 0.0021266395 -0.0037636597 0.0012645012 0.0041158247 -0.0081642691 0.0045588881 0.0019145207 -0.0031219843 0.0035052818 0.0022586771 -0.0005959809 0.0013942549 0.0018526365 -0.0003403439 -0.0006162476 0.0070481039 -0.0119371774 0.0058388750 0.0105887746 -0.0256278840 0.0144375057 0.0014226865 -0.0032743830 0.0030479216 0.0036091350 0.0008207568 0.0016655193 0.0014561115 0.0007869997 -0.0016604441 -0.0014829048 -0.0016714654 -0.0004585501 -0.0025931526 -0.0023362925 -0.0000399409 -0.0019444592 -0.0019871779 0.0008509363 -0.0025973263 0.0004152555 -0.0000129795 -0.0012049980 0.0014160671 -0.0018402313 -0.0026827984 -0.0028477520 0.0003673949 -0.0068468000 -0.0062652741 0.0009498540 -0.0027815873 0.0028652816 -0.0005628080 -0.0059785935 0.0017272958 0.0017607139 0.0003571179 0.0045855606 -0.0042757936 0.0000574978 -0.0053643705 -0.0006760365 0.0021452410 0.0042062817 -0.0039883870 0.0032502075 0.0022356226 -0.0022013957 0.0061518579 0.0094923719 -0.0029657147 0.0008446039 -0.0018420959 -0.0003929384 -0.0004181327 -0.0013715290 -0.0001041104 0.0012890645 -0.0014426125 -0.0003190646 0.0005280653 -0.0001036557 -0.0002540354 0.0029564736 -0.0017973992 0.0003412777 0.0015007118 0.0007023912 0.0001341647 -0.0007024993 -0.0001229468 0.0000865224 -0.0005466000 0.0002573335 0.0000001527 -0.0011903271 -0.0000976919 0.0010502300 -0.0005906237 0.0006928621 0.0004333833 -0.0012414257 -0.0018752615 -0.0005642304 -0.0022032093 -0.0021151855 -0.0012002533 -0.0008471176 -0.0010815323 -0.0003945175 -0.0009775382 -0.0002707018 -0.0005159201 0.0006083491 -0.0012747561 0.0010213983 -0.0007583100 0.0003354836 -0.0001410725 -0.0025208603 -0.0010141128 -0.0011814965 -0.0018962707 -0.0003082714 -0.0009661773 -0.0034647344 -0.0010371523 -0.0013164072 -0.0023133397 0.0003855421 -0.0009733246 -0.0493379600 0.0493226300 -0.0727617527 -0.0357871466 0.0880051428 0.0404329500 -0.0815339988 -0.1823352051 -0.2970902383 0.0071706369 -0.0320825494 0.0979948990 -0.0129848369 0.0987924465 -0.0833833329 0.3012183548 0.0863076860 -0.1688954119 -0.0699105227 0.0802181371 -0.0411451898 -0.0672596743 -0.0430904173 0.0643026110 0.0094221921 -0.0042010365 0.0156909977 0.0229447517 -0.0076827106 0.0442542800 0.0216735173 -0.0072890171 0.0416531536 0.0143980207 -0.0046877795 0.0323339647 0.0050986852 -0.0032786305 0.0125374994 0.0134508733 -0.0142734760 -0.0128281714 0.0073274698 -0.0028293470 0.0182111935 -0.0062024331 0.0006037125 -0.0220776654 0.0049786947 -0.0120659071 -0.0329405709 -0.0109446360 0.0021205978 -0.0375345564 0.0267307961 -0.0285201617 -0.0253784487 -0.0091429236 -0.0023923405 -0.0125022729 0.0093804139 -0.0137950834 -0.0381563078 0.0007668697 -0.0022133121 -0.0626590335 0.0213287726 -0.0229132997 -0.0384073130 0.0025415718 0.0133130606 -0.0252940435 -0.1041861959 0.1112262432 -0.0797428268 -0.0823094473 0.0927165009 -0.0670860297 -0.0281630174 0.0462859662 -0.0349910534 -0.0800091683 0.0909712221 -0.0666590799 -0.0562080117 0.0705339677 -0.0520115417 -0.0295143014 0.0476045658 -0.0362006608 -0.0530182149 0.0673781138 -0.0506647009 -0.0996822181 0.1075694452 -0.0785236535 -0.0570232912 0.0712410043 -0.0531651376 -0.0100274557 0.0316005941 -0.0260921211 -0.0059111891 0.0273178904 -0.0201103179 0.0039255326 0.0257779020 -0.0000140719 -0.0024445179 0.0332261288 0.0049887832 0.0253167594 0.0055197974 0.0058974025 0.0624532384 -0.0291581049 0.0148561031 0.0398238898 -0.0090033958 0.0147536599 0.0295224543 0.0029409785 0.0018178610 0.0478398276 -0.0143710655 0.0061274444 0.0582871167 -0.0264308130 0.0190693020 0.0364515866 -0.0067885915 0.0175953473 0.0175398396 0.0169682049 -0.0040325261 0.0507547957 -0.0163711708 0.0032546343 0.0694730607 -0.0379805341 0.0250082910 0.0770473401 -0.0425256984 0.0179581326 -0.0549518618 0.0694513389 -0.0486082569 -0.0264621688 0.0386691045 -0.0464535719 0.0047492107 -0.0242191093 -0.0591721766 -0.0026071300 0.0427268492 0.0367501370 0.0026539136 0.0207040760 0.0525352600 0.0057608721 0.0039529559 0.0686467931 -0.0074402300 0.0063884632 0.0863340836 -0.1052712682 0.0367762222 0.1100927073 0.0305237892 0.0190934830 0.0007493118 0.0444428239 -0.0412674152 0.1723547170 0.0059366641 0.0129570106 0.0495738827 0.0112007240 -0.0103790657 0.0628813713 -0.1679018067 0.0152681796 0.0483058228 -0.0569034214 0.0335406057 0.1182634016 -0.1479956831 0.0790944560 0.1790705616 0.0120768849 0.0305902925 -0.0404600701 0.0884449067 0.0128640484 0.0003013521 0.0189791484 0.0224988036 -0.0087490772 0.0407985533 -0.0438669207 0.1879484180 0.0211677008 -0.0451408931 0.2269174545 0.1040842015 -0.0681098098 0.1581860237 0.0044254174 -0.0095920489 0.0829706942 0.0183881348 -0.0237488001 0.0573592720 0.0146228786 -0.0149386316 0.0577119615 0.0018869963 -0.0028017320 -0.0058574457 0.0063420161 0.0132740761 -0.0255633567 0.0025577905 0.0111962304 -0.0417105795 -0.0036202192 -0.0097617887 -0.0365205300 -0.0093235512 -0.0232134080 -0.0193962345 -0.0068207656 -0.0178162439 -0.0051907368 0.0145535739 0.0274939316 -0.0265809638 0.0052138517 0.0240769981 -0.0562015933 -0.0038031291 -0.0197703167 -0.0475461571 -0.0154085668 -0.0380971424 -0.0170678566 -0.0103640295 -0.0273445293 0.0076309150 0.0047939643 0.0045704068 -0.0864769449 -0.0011646406 -0.0112597214 -0.1038067296 -0.0096492228 -0.0584356165 -0.0926698734 -0.0090945077 -0.0862870259 -0.0676519792 -0.0005190534 -0.0666886380 -0.0520578837 0.0086120510 0.0393078349 -0.0915830260 -0.0010151620 0.0106375007 -0.1240347917 -0.0199538666 -0.0804387719 -0.1050357776 -0.0157017351 -0.1237663862 -0.0599985830 -0.0002268823 -0.0877152199 -0.0318623217 -0.0076492995 -0.0422209553 -0.0476164943 -0.0002649928 -0.0054426992 -0.0552799987 -0.0496342794 -0.1524000483 -0.0926198829 0.0024593971 -0.0243326986 -0.1257890592 0.0336888017 -0.0095581401 0.0661121536 0.0306012434 -0.0087805756 0.0609396179 0.0497744196 -0.0131731984 0.0957865301 0.0633906706 -0.0164733947 0.1191615146 0.0515998455 -0.0135212204 0.0999704873 0.0761387335 -0.0193681760 0.1423597163 0.0450096680 -0.0125770583 0.0840025370 0.0610492562 -0.0162309412 0.1127643183 0.0439012086 -0.0126501908 0.0786443678 0.0722343882 -0.0189001173 0.1307368434 -0.0070621737 0.0116219071 0.0309584801 -0.0128749938 0.0127252640 0.0101776978 -0.0164326894 0.0256362463 0.0624614384 -0.0299905381 0.0392822082 0.0740435405 -0.0128801934 0.0255369368 0.0764557315 -0.0369126249 0.0500236175 0.0984002536 -0.0264711616 0.0267875518 0.0226792455 -0.0349775608 0.0397508897 0.0542509280 -0.0303739905 0.0272457586 0.0066307640 -0.0456038297 0.0505882154 0.0637096024 -0.0098382272 0.0652164141 0.0271219490 -0.0033876163 0.0529329719 0.0207377517 -0.0206414950 0.0801824322 0.0478631804 -0.0112373593 0.0812797779 0.0056957279 -0.0060674540 0.0515496297 0.0409086034 -0.0107200154 0.0600435680 0.0498807076 -0.0041285685 0.0431699304 0.0442044771 -0.0059089707 0.0578327507 0.0293613733 -0.0288291790 0.0116090018 -0.0371519297 -0.0203221837 0.0136350686 -0.0346494560 -0.0220791032 0.0138832135 -0.0301083117 -0.0214067163 0.0121716916 -0.0078628778 -0.0306468599 0.0116638969 -0.0298601868 -0.0050484315 0.0178163029 -0.0029715391 -0.0180997636 0.0106212748 0.0096488460 -0.0167303345 0.0068280584 0.0507646554 -0.0053087235 0.0164187948 0.0176543735 -0.0169160678 0.0056586552 0.0676018908 0.0064460185 0.0234376762 -0.0323009550 -0.0388011006 0.0112437987 -0.0428570339 -0.0136975696 0.0223116580 -0.0571753605 -0.0167360292 0.0252605169 -0.0636746909 -0.0077423403 0.0292161894 -0.0705445670 0.0045315720 0.0006620988 -0.0267000872 -0.0801345255 -0.0390045192 0.0162342713 -0.0630699192 -0.0332237955 0.0122454549 -0.0199768042 -0.0180716214 0.0014576649 -0.0655451509 -0.0290480306 -0.0137597913 -0.0389373050 -0.0299133263 0.0330488151 -0.0175360248 -0.0223026105 0.0269964003 -0.0437716003 -0.0213377258 -0.0197336728 -0.0840878148 -0.0313704482 -0.0303311256 -0.0365488757 -0.0330277398 0.0536784891 0.0021787235 -0.0204175392 0.0423018870 0.0009894469 -0.0113427666 -0.0019815430 0.0127807240 -0.0209658443 0.0245626925 0.0102332584 -0.0285731546 0.0478315642 0.0433725069 -0.0126643328 0.0208186948 0.1228247656 -0.0195023471 0.0212523733 0.0871100701 -0.0424429769 0.0554837480 0.0366652079 0.0158672422 -0.0141068527 0.0767704377 0.0127821591 -0.0140966977 0.1275285614 -0.0461892136 0.0561018008 0.0912811019 -0.0622926644 0.0820813321 0.0003445918 0.0400913866 -0.0420115702 0.0713425689 0.0355084230 -0.0428390477 0.1630506825 -0.0695642920 0.0827683711 0.1543116478 -0.0221056525 0.0213559263 -0.0470520897 -0.0194141579 -0.0462440972 -0.0353117625 -0.0020334313 -0.0565773748 0.0050118498 0.0263185709 0.0074712290 -0.0368929797 -0.0304078016 0.0183373300 0.0087495227 -0.0116094940 0.0440128781 0.0447060380 0.0143545837 0.0035876413 0.0416217801 0.0193794405 -0.0592929051 0.1039947751 -0.0374492732 -0.0904592125 0.0176789125 0.0262904506 -0.0089215392 0.0065855214 0.0825621514 -0.1358570870 0.0211511495 -0.0141512575 0.1152437123 0.0775334577 -0.0029216063 0.1524885839 0.1572336372 -0.0183017794 -0.0379133507 0.0491882471 -0.0328599863 -0.1136770863 0.1412222770 -0.0927926976 -0.1398232702 0.0263524592 0.0135192838 0.0181446707 -0.0151312284 0.0414693576 -0.0046866440 0.0231859573 0.0245216743 -0.0159879625 0.0098072275 0.0907066741 -0.1758431785 0.0226152830 0.0748336646 -0.1734516191 -0.0353098001 0.1278809428 -0.1104056213 0.0686998081 -0.0048567810 0.1582173781 0.1274686810 0.0071777772 0.1254997425 0.0779854775 -0.0044256734 0.2061185958 -0.0264005871 0.0035563233 -0.0383426847 -0.0171905290 -0.0133112758 -0.0300541880 -0.0072724215 -0.0363930066 -0.0189731496 -0.0064051290 -0.0423417705 -0.0163990698 -0.0167822377 -0.0219046543 -0.0265731926 -0.0274924692 0.0017396952 -0.0380258752 -0.0173653226 -0.0119415938 -0.0305619864 -0.0000284184 -0.0514430084 -0.0116363426 0.0049676889 -0.0715648781 -0.0019609746 -0.0161618951 -0.0259102943 -0.0247768513 -0.0356524327 0.0161450433 -0.0452591899 -0.0053543727 0.0171768270 0.0108168041 0.0031449641 0.0270269075 0.0018161886 0.0220219628 0.0467270499 -0.0108313123 0.0338507776 0.0576505458 -0.0144133544 0.0249734928 0.0468985056 -0.0051563539 -0.0210394311 0.0015386926 0.0200921816 -0.0050221216 0.0195898153 0.0040771930 0.0288166644 0.0552641528 -0.0200184077 0.0494312280 0.0739531121 -0.0246818769 0.0333697092 0.0549297231 -0.0084097164 0.0185008738 -0.0868261062 0.0023816119 -0.0007443602 -0.0782342594 0.0049629802 0.0515427519 0.0814484240 -0.0291305812 0.0106090720 0.0342588925 -0.0178983537 -0.0147585866 0.0156845816 -0.0124792242 -0.0124155699 0.0150389734 0.0016091375 -0.0067119608 0.0183634948 -0.0045236128 0.0041264133 0.0207643785 0.0176231699 -0.0086930658 0.0186153124 -0.0160030948 0.0104589687 0.0228585737 0.0237056712 -0.0001345926 0.0178943507 0.0253388299 0.0079705174 0.0204897984 0.0330222740 0.0026491912 0.0179352036 0.0376475645 0.0175847311 0.0222313666 0.0512303011 -0.0321109777 -0.0002437201 0.0439587742 -0.0305134796 -0.0010621106 0.0653788737 -0.0499584730 -0.0103011631 0.0592455198 -0.0646788935 -0.0195890914 0.0954789838 -0.0522685692 -0.0104217295 0.0431645889 -0.0785453272 -0.0270322199 0.1071276150 -0.0453957299 -0.0106490471 0.1025435508 -0.0622067954 -0.0196985237 0.1178692241 -0.0437873125 -0.0108956673 0.1191636320 -0.0738950594 -0.0271650189 0.1469053567 -0.0859355570 -0.0579836607 0.0641950714 -0.0800054105 -0.0396464701 0.1151190252 -0.1064281961 -0.0757254228 0.0566240149 -0.1121470693 -0.0801887266 0.0557140891 -0.0501803143 -0.0409555769 -0.0496534921 -0.0795997764 -0.0648432094 -0.0660362126 -0.0181809623 -0.0154107272 -0.0814638618 -0.0633355325 -0.0513019868 -0.0544274301 -0.0352588695 0.0292312284 -0.0126508662 -0.0601002596 0.0147725914 0.0070601685 -0.0455186663 0.0117212711 -0.0016677360 -0.0020648527 0.0012871999 -0.0130640744 -0.0153351398 0.0242661383 -0.0209634391 0.0447992169 0.0144834976 -0.0164469367 0.0256508337 -0.0034447271 -0.0109452205 0.0637257980 -0.0067883557 0.0120740887 0.0622283704 0.0125188939 -0.0026743027 0.0749054918 -0.0088135289 0.0266854432 0.0423249954 0.0342728305 -0.0304237282 -0.0057675996 0.0405777020 -0.0327384034 0.0209655868 0.0613746800 -0.0416375569 0.0376136128 0.0745940030 -0.0461478968 0.0064259623 0.0779351088 -0.0485384892 0.0207038737 0.0562594066 -0.0343204638 0.0617465485 -0.0052719970 0.0093232722 0.0537382896 0.0032928318 0.0034627045 0.0329148873 0.0235776473 -0.0115199357 0.0268257853 0.0271895794 -0.0146319076 0.0700605509 -0.0088719053 0.0134791747 0.0590847638 0.0021014794 0.0060359912 0.0155800196 0.0383496525 -0.0224832500 0.0130763192 0.0377079449 -0.0232354541 0.0907264862 -0.0260306250 0.0265365883 0.0699092403 -0.0049358801 0.0125628666 0.0257323144 0.0332173734 -0.0192253443 0.0261377973 0.0077164634 -0.0030464839 0.0352433849 -0.0227409531 0.0273290801 0.0507755049 0.0411821446 -0.0142749835 0.1216590298 0.1019623276 -0.0310719382 0.0826830080 0.0463597416 0.0249546046 0.0517453453 0.0681143731 -0.0623806199 0.0893880059 0.0969711080 -0.0708308812 0.1178834434 0.0778036542 0.0165620633 0.0820595088 0.0253372030 0.0635449949 0.0253140618 0.0638891778 -0.0957197612 0.0925176755 0.1158776550 -0.1115770084 0.1432535056 0.0820290924 0.0479845910 0.1496198965 0.1247689832 -0.0372887002 -0.0138005798 0.0624262224 -0.0394870427 -0.0053425935 0.0704144174 -0.0450599742 0.0630722042 0.0185099100 0.0066920478 -0.0509513208 -0.0308804924 -0.0228235248 -0.0614750820 -0.0545210185 -0.0195680292 -0.0906233301 -0.0379167763 -0.0254674322 -0.1024545660 -0.0364299520 -0.0060993787 -0.1409155417 -0.0023436208 0.0130797168 -0.0866951520 -0.0253319010 -0.0406865441 -0.0862402144 -0.0815770469 0.0391863013 -0.0393567642 -0.0987146327 -0.0074573999 -0.0511631620 -0.1180652113 -0.0086179804 -0.1762079990 -0.0175910523 -0.0203115223 -0.0946968143 -0.0059032679 0.0311622106 -0.1669321430 0.0421353979 0.0445266549 -0.0810753658 0.0145498125 -0.0773703512 -0.0561295093 -0.0654510575 -0.0532981427 -0.1124983241 -0.0178398055 -0.0089194963 -0.1055929304 -0.0793432422 0.0500842356 -0.0976443345 -0.0999593113 0.0660691184 -0.0473004708 -0.0985782354 0.0302408169 -0.0859117916 -0.1289858520 -0.0146752416 -0.0457170224 -0.0933966993 -0.0090160827 -0.0296941813 -0.1474006385 -0.0022174469 -0.0378560625 0.0442522263 -0.0060473431 -0.0362802822 0.0233052326 0.0132120857 -0.0303101348 0.0179649204 0.0283318077 -0.0270203717 0.0346487444 0.0234399018 -0.0300601032 0.0593029260 0.0033478098 -0.0361008789 0.0646464730 -0.0117898335 -0.0392022579 0.0071039122 0.0171457467 -0.0273137651 -0.0014410614 0.0437896037 -0.0209988925 0.0268149327 0.0374521548 -0.0274374173 0.0733882945 -0.0002458070 -0.0383254145 0.0821284765 -0.0272736679 0.0301020440 -0.0310435004 0.0356444582 0.0090873552 -0.0571006559 0.0542042636 0.0218626328 -0.0342250304 0.0441296618 0.0589703976 0.0213575431 0.0137992531 0.0814261497 0.0495774029 -0.0059765805 0.0175599482 -0.0562823995 0.0442526285 -0.0186710571 -0.0992844109 0.0773233082 -0.0063868441 -0.0748759855 0.0640507425 0.0674697662 0.0390578418 0.0074092988 0.1094967874 0.0900045970 -0.0297265640 -0.0121143269 0.0324636665 0.0396187755 -0.0266132431 0.0162062276 0.0453323017 -0.0246515336 -0.0909879888 0.0711653665 -0.0097577988 -0.0893449614 0.0707576775 -0.0360993761 -0.0114178909 0.0018721218 -0.0131106951 -0.0168019455 -0.0024858558 -0.0476402941 -0.0296759456 0.0126139341 -0.0359789563 -0.0520343420 0.0188580013 -0.0658807846 -0.0253434250 0.0160689470 -0.0447229937 -0.0656759525 0.0270487993 -0.0008834228 -0.0400214771 0.0045789854 -0.0121319373 -0.0571391602 0.0149802485 0.0177269669 -0.0441813758 0.0020623445 -0.0023169943 -0.0748460161 0.0202873128 0.0288532824 -0.0241609450 0.0020326334 0.0490383049 -0.0261564213 0.0125638936 0.0112262578 -0.0428439613 0.0064016896 0.0147772201 -0.0630394923 0.0197095774 -0.0052792883 -0.0411988434 -0.0002383494 0.0009078922 -0.0773085788 0.0226196193 0.0523385720 -0.0475585492 0.0264977105 0.0357267981 -0.0655017818 0.0297225824 0.0684638660 -0.0490942552 0.0348021217 0.0382636238 -0.0813466023 0.0402276004 -0.0340991905 -0.0703229692 -0.0086743657 0.0032489328 -0.1139423110 0.0072020992 -0.0850856873 -0.0927345551 -0.0052686329 -0.0091946799 -0.0351464570 -0.0179020402 -0.0790786305 0.0110049064 -0.0406958370 -0.1090734005 -0.0115083923 -0.0560994850 -0.0975337776 0.0477031708 -0.0517637687 -0.0511597136 0.0297319411 -0.0253117296 -0.0068891495 -0.0119595741 -0.0261740213 -0.0321378104 0.0086422683 -0.1272371495 -0.0242686987 0.0056451892 -0.0851424575 -0.0019050565 -0.0042283606 0.0188428573 0.0058135281 -0.0163353906 0.0248381864 -0.0021840437 0.0004472114 0.0675079048 0.0005291094 -0.0058899555 0.0488431331 0.0095182365 -0.0060264618 0.0629220332 0.0093285844 0.0000081359 0.0580949089 0.0173028508 -0.0065943561 0.0610922543 -0.0178592121 0.0068699381 0.0935766606 0.0254039405 -0.0277352595 0.0761869241 0.0064484338 0.0194304498 0.1305566540 0.0593320513 0.0186120837 0.1783727781 -0.0462541283 0.0597853198 0.1310071016 -0.0153521228 0.0228728133 0.0632129526 0.1263370722 0.0773909845 0.0016923752 0.0966842697 0.0654458969 0.0099056650 0.0224452547 0.0343255991 0.0331717238 0.1000588588 0.0579094549 0.0574932999 0.0543669326 0.0581099321 -0.0265601437 0.0176771989 0.0421425840 -0.0148031885 0.0629041202 0.0427535744 0.0697696803 0.1323691978 0.0643352677 0.0871066430 0.0498311910 0.0639389084 -0.0636156371 -0.0152713754 0.0334384963 -0.0423654046 -0.0052187355 0.0156002874 0.0444491935 -0.0134412253 0.0043147013 0.0369549909 -0.0069406665 -0.0095762010 0.0436866625 -0.0090986044 0.0125222899 0.0353823023 0.0219141201 0.0259003080 0.0313748796 0.0136380881 -0.0025114002 0.0530391711 -0.0171695132 0.0343671403 0.0158794090 0.0000054110 0.0404569503 0.0137365964 0.0289827098 0.0053621560 0.0512107265 0.0209920933 -0.0201206190 0.0690544806 -0.0342686460 0.0400335651 -0.0001142328 -0.0035125814 0.0548231423 -0.0041655165 0.0469215252 -0.0054877169 0.0653299689 0.0340747144 0.0305580703 0.0300130332 0.0719133920 0.0356633727 0.1126346651 0.0307988966 0.0388965838 0.1248218859 0.0212166022 -0.0036119745 0.0137697227 -0.0369944647 -0.0217089306 0.0252112677 -0.0294623897 -0.0101486809 0.0264794547 -0.0290162161 0.0123773893 0.0028635123 -0.0261516941 0.0142753049 -0.0351325366 -0.0549870230 -0.0079210703 -0.0413096105 -0.0120614823 0.0278317626 -0.0669752433 -0.0042956354 0.0304313118 -0.0216877217 -0.0195478166 -0.0200631662 0.0541263539 -0.0043474480 -0.0160486652 0.0642623258 -0.0770760756 -0.0293404004 -0.0562985701 -0.0320351909 -0.0082184979 -0.0562479774 -0.0706150623 0.0045445644 -0.0141928757 -0.0160372079 0.0260553255 -0.0697878757 0.0103104536 0.0398551696 -0.0625685485 -0.0154312349 0.0287507023 -0.0848422875 -0.0050806178 0.0360308001 -0.0462502689 -0.0131348154 0.0169775885 -0.0008786822 0.0179946472 0.0477450346 -0.0109605752 -0.0125660269 -0.0189016844 0.0614203675 0.0126763414 -0.0060692489 0.0557663304 -0.0004233805 -0.0216364853 0.0840302119 -0.0041400569 -0.0219454118 -0.0268720905 -0.0015163576 -0.0181330571 -0.0338004679 -0.0018387440 -0.0223788925 -0.0403447808 -0.0082416555 -0.0269872552 -0.0415336569 -0.0114700413 -0.0322112001 -0.0339630552 -0.0087899537 -0.0323953964 -0.0249300934 -0.0005690070 -0.0112004849 -0.0355810113 0.0015246149 -0.0195555788 -0.0458831289 -0.0113692922 -0.0243587776 -0.0524735216 -0.0152480984 -0.0362077208 -0.0342320842 -0.0120776904 -0.0383466855 -0.0167227076 -0.0117922186 0.0187819316 -0.0265526760 -0.0107106114 0.0022543346 -0.0819879132 0.0237456873 -0.0402668983 -0.0941985490 0.0605563329 -0.0611456063 -0.0568563344 0.0603887979 -0.0397727710 -0.0035384819 -0.0420643594 0.0485663063 -0.0141497539 -0.0385070418 0.0192932837 -0.1134613525 0.0171195450 -0.0700280493 -0.1472904381 0.0878965425 -0.0953196369 -0.0679904890 0.0886859798 -0.0568329102 0.0271051785 -0.0186508641 -0.0321116050 -0.0541128116 -0.0075585783 -0.0133339864 -0.0595666617 0.0255263646 -0.1435490641 -0.1497685544 0.0031933115 -0.0203410192 -0.1851565699 -0.0348002919 0.0201605587 -0.0965101433 -0.0223763076 0.0173011981 -0.0403542172 -0.0613843088 0.0410410142 -0.1683983456 -0.0763550690 0.0601552733 -0.1831072161 -0.0709368628 0.0424248548 -0.2134956254 -0.0982295208 0.0765565161 -0.2405545640 -0.0362580748 0.0387052738 -0.0514974609 -0.0630423653 0.0593013208 -0.1221352503 -0.0272800398 0.0389309842 -0.0060748730 -0.0745235655 0.0754021654 -0.1315020179 0.0071251418 -0.0138857783 0.0422489892 0.0058033673 -0.0138542214 0.0604646772 0.0141926450 -0.0241028312 0.0182358733 0.0170290738 -0.0324195521 0.0212294629 0.0163928066 -0.0251558786 -0.0032383839 0.0229064189 -0.0392414747 0.0034947824 0.0080117126 -0.0230387613 0.0648412496 0.0122402409 -0.0316750023 0.0466698483 0.0076100775 -0.0230952183 0.0819133025 0.0136502165 -0.0378970072 0.0500307645 -0.0478382945 -0.0410466049 0.0427999733 -0.0323749504 -0.0518654992 0.0634547713 -0.0734520568 -0.0523137907 0.0445317091 -0.0475919450 -0.0340551308 0.0347029934 -0.0494331319 -0.0124314881 -0.0019889775 -0.0646654966 -0.0370944141 -0.0222583503 -0.0564938751 0.0196208597 -0.0167121827 -0.0360341681 -0.0101037126 0.0179352572 0.0085157500 -0.0047825440 -0.0601100924 -0.0007020315 0.0067895456 -0.1113642245 -0.0001241083 0.0061549804 -0.0924982823 0.0062483502 0.0021734200 -0.0362004969 0.0064915334 -0.0050430761 -0.0455956339 0.0082111094 0.0055274183 -0.0054887431 0.0021422677 0.0007949741 -0.0034443023 -0.0286970241 -0.0042844248 0.0911303391 -0.0050458253 0.0035534012 0.0340005760 -0.0400946794 -0.0057638207 0.1272009866 0.0221160096 0.0066691055 -0.0360351284 0.0024688000 -0.0081436126 -0.0464131155 0.0110308204 -0.0115407945 -0.0579967659 -0.0079511898 -0.0192429926 -0.0631616619 0.0300855708 -0.0177747215 -0.0677371456 0.0133296042 -0.0041487362 -0.0209152066 -0.0418586337 -0.1235957340 0.0785622955 -0.0330370614 -0.0966044245 0.0600668512 -0.0079203181 -0.0295953411 0.0122958204 -0.0310310470 -0.0942646763 0.0197697217 -0.0240114629 -0.0638408666 0.0764194557 -0.0116005028 -0.0302383821 0.0525451612 -0.0192687850 -0.0601782403 -0.0052228999 -0.0389472387 -0.1191055329 0.0055104848 -0.0259214930 -0.0642528772 0.1081354910 -0.0026699741 -0.0049715609 0.0666012521 0.0072894044 -0.0009310599 -0.0075194627 0.0114145243 0.0149800171 -0.0095084640 0.0067985688 0.0248866805 -0.0144083073 0.0031030939 0.0146591577 -0.0097540503 -0.0365125346 0.0240664859 -0.0115089255 -0.0276154368 0.0445121761 -0.0288034311 0.0160050943 -0.0121723998 0.0086663908 -0.0048617113 -0.0072246504 0.0080166918 -0.0477540694 0.0488727596 -0.0300194113 -0.0377003473 0.0643045010 -0.0430792799 0.0403450068 -0.0314246528 0.0251507266 0.0037588193 -0.0269000070 0.0240838975 -0.0726705295 0.0720630001 -0.0447556251 -0.0523013856 0.0280060354 -0.0122405863 -0.0202409729 -0.0599675696 -0.0432770485 -0.0043611297 -0.0414518296 -0.0554247575 0.0028201402 0.0051171013 0.0144367753 0.0435986183 0.0272355413 -0.0104288455 0.0225529397 0.0177384686 -0.0229894996 0.0108926101 -0.0045913539 0.0047739197 0.0054584228 -0.0068185958 0.0497332180 -0.0440571215 0.0339355604 0.0726270537 0.0249219585 -0.0053116655 0.0065092602 0.0335512278 -0.0561524569 0.1109062606 0.0103920884 0.0280974143 -0.0657403747 -0.0207831628 0.0278756845 -0.0891766642 -0.0858621441 0.0148588142 0.0330802927 0.0007487047 0.0304996051 0.0873408725 -0.0731922822 0.0773536383 0.1112493503 0.0154833508 0.0007978636 -0.0148547381 0.0535994932 -0.0090360992 0.0060367291 0.0188723068 -0.0034533092 0.0029591238 0.0331593502 -0.0634707049 0.1442021014 0.0205575738 -0.0469476760 0.1413795018 0.0661146506 -0.0933592077 0.0899975280 -0.0114613416 0.0298350354 -0.0957762638 -0.0511615519 0.0227315858 -0.0726359548 -0.0240286010 0.0327355780 -0.1189303235 0.0198193964 -0.0052986657 -0.0280157863 -0.0094326153 -0.0023057621 -0.0036455808 -0.0049898404 0.0135945333 0.0324856383 0.0289320634 0.0288173165 0.0416144728 0.0618849496 0.0211920634 0.0209167621 0.0574958684 0.0016080373 -0.0127877497 -0.0386878843 -0.0111056304 -0.0132367101 -0.0275165106 0.0150042225 0.0517453224 0.0303026546 0.0562329857 0.0758182270 0.0898102680 0.0311022258 0.0305948949 0.0828328224 -0.0043499474 -0.0289017144 -0.0168605481 0.0035113912 0.0053997057 -0.0150252810 -0.0009704507 -0.0146865644 0.0041380742 -0.0065530107 -0.0239783555 0.0254958196 -0.0028616882 -0.0161464212 0.0260292735 0.0052989522 0.0019260377 -0.0356046884 0.0047346170 0.0146660593 -0.0302795953 -0.0022344158 -0.0222319436 -0.0002403056 -0.0200405408 -0.0406131670 0.0405846469 -0.0072906110 -0.0238305268 0.0427125315 0.0088147762 0.0074149789 0.0547221684 0.0838236457 0.0813767292 0.0075394994 0.0503436781 0.0968688589 -0.0052370613 -0.0556646529 -0.0382255920 0.0009821839 0.0046644894 -0.0547008317 -0.0055017245 0.0174200436 -0.0973198130 0.0034903415 0.0155549919 -0.0567325341 -0.0160038993 0.0326824197 -0.1363388000 -0.0172945978 0.0463532645 -0.1295719234 -0.0224450914 0.0335210488 -0.1718293476 -0.0265924001 0.0576890397 -0.1607400576 0.0060035944 0.0308728034 -0.0420185310 -0.0040758219 0.0452201458 -0.0789295086 0.0139303037 0.0314047735 -0.0013921635 -0.0022972671 0.0555003443 -0.0687793095 -0.0222910863 -0.0107982330 0.0481721360 -0.0407323684 -0.0104770604 0.1053161898 -0.0363843898 -0.0245064446 0.0529809649 -0.0695551068 -0.0334831796 0.1229191854 -0.0224759724 -0.0273165488 0.0033559534 -0.0806627106 -0.0428778251 0.1278540994 -0.0740408419 -0.0198027446 0.1770742700 -0.0898646000 -0.0305883062 0.1886360717 -0.0878595980 -0.0187919624 0.2243238983 -0.1169637546 -0.0375508875 0.2460267954 0.0691988495 0.0423157901 -0.0341104972 0.0566312668 0.0449689224 -0.0626841138 0.0942544772 0.0512326719 -0.0378484366 0.0791319669 0.0422541183 -0.0206451633 0.0555392323 0.0242419919 0.0268725401 0.0741137824 0.0473672184 0.0447996653 0.0500619283 -0.0040866049 0.0458637069 0.0503588750 0.0251378939 0.0157060270 0.0769766971 -0.0440142040 -0.0138838445 0.0987487875 -0.0339761983 -0.0233317078 0.0866745011 -0.0313274857 -0.0177526654 0.0508994360 -0.0212123993 -0.0100040046 0.0584829096 -0.0393389932 -0.0104027661 0.0085459985 -0.0316879227 0.0073174473 0.0263145463 -0.0176018218 -0.0018854396 -0.0335498669 -0.0153633651 0.0375953579 -0.0211197299 -0.0313701282 0.0275487367 -0.0567897260 -0.0143061376 0.0529100523 0.0160831292 -0.0481199856 0.0060759294 0.0490307869 -0.0557858926 -0.0009138671 0.0280837454 -0.0516007026 0.0209234847 0.0474627821 -0.0520287796 0.0396406270 0.0055825672 -0.0428064537 0.0308289836 -0.0303630816 -0.0329868754 0.0259180954 -0.1952025375 0.1108174976 -0.0614489471 -0.1563345692 0.0772867200 -0.0385353726 -0.0629253167 -0.0018538840 0.0165129857 -0.1167316851 0.0424235012 -0.0154367301 -0.1456875523 0.0679480761 -0.0323502001 -0.0986124314 0.0276053716 -0.0051380435 -0.0683321756 0.0013117000 0.0130800810 -0.1229326460 0.0475574103 -0.0192194926 -0.1752216149 0.0924191162 -0.0501308718 -0.0941454821 0.0224090321 -0.0039563799 -0.0366073914 -0.0213248025 0.0318337013 -0.0289353490 -0.0030742699 0.0371620903 -0.0361080134 -0.0036915629 0.0619255245 -0.0043494661 0.0353415423 0.0244030670 0.0457057880 0.1438105815 -0.0045054816 -0.0094571983 0.0997522317 0.0528858759 0.0263998724 0.0228848688 -0.0179451528 0.0542417427 0.0750725600 -0.0321832293 0.0141221700 0.1567301580 0.0378156453 -0.0323383420 0.1064551895 0.0881667984 0.0305476257 -0.0262529334 -0.0428100183 0.0801096575 0.0637124526 -0.0696082334 0.0072743654 0.2099249954 0.0615512506 0.0634762995 0.1864373586 -0.0154952282 -0.0322824899 -0.0284661769 0.0328823260 -0.0224025329 -0.0455542788 0.0361445638 -0.0332364551 -0.0442962003 0.0372090131 -0.0388701281 -0.0337130838 0.0022438750 -0.0432565773 -0.0174875537 -0.0091052094 -0.0531628602 0.0012053148 -0.0249764339 -0.0218894952 -0.0046927717 -0.0681871920 0.0053281385 -0.0443398346 -0.0883266721 -0.0316102651 -0.0270435164 -0.0428720503 -0.0241157426 0.0521282525 -0.1065480343 -0.0418944362 -0.0184937387 -0.0040968269 -0.0551378940 0.0100447636 -0.0251885321 0.0316407074 -0.0327880264 -0.0631071367 -0.0298146778 -0.0414761499 -0.1063990849 0.0238920685 -0.0814178044 -0.1076547214 -0.0269488916 -0.0231658372 -0.0397347034 -0.0533192606 -0.0464673157 -0.0499420481 -0.0246183257 -0.0295329285 -0.0190366530 -0.0146745811 0.0581680395 -0.1443548039 -0.0191756012 0.0468641441 -0.1182056718 -0.0415317153 0.0886391009 -0.0856291057 -0.0485203585 0.0081222562 -0.0537736226 -0.0681802516 0.0305464100 -0.0156443839 -0.0575437588 0.0132833225 -0.0222634313 0.0771678713 -0.0434829520 -0.0132374815 0.0566594663 -0.0141804637 -0.0231226878 0.0417156627 0.0246495774 -0.0323264748 0.0494727473 0.0342811585 -0.0320457134 0.0732906776 -0.0017609629 -0.0188676935 0.0887103328 -0.0438624170 -0.0080600976 0.0513701587 -0.0160111135 -0.0248707441 0.0229519641 0.0526695830 -0.0415753118 0.0321801616 0.0897341734 -0.0439990902 0.0792028058 0.0054425642 -0.0186284803 0.1075248318 -0.0698333328 0.0012082566 -0.0391762051 -0.0555657543 0.0449867208 -0.0385720845 -0.0540760099 0.0481161577 -0.0330915214 -0.0412411411 0.0433356591 -0.0309884467 -0.0345653542 0.0384722676 -0.0317725482 -0.0371316192 0.0357928027 -0.0421565831 -0.0638598862 0.0471620437 -0.0405094333 -0.0603126348 0.0528230935 -0.0265279582 -0.0315800221 0.0417140736 -0.0269398711 -0.0254489149 0.0352505865 -0.0289878908 -0.0301836403 0.0306960533 0.0190132462 0.1207679687 -0.0489685200 0.0313962132 0.1028335848 -0.0477633441 -0.0053171243 0.0032816980 0.0330005725 -0.0432759966 -0.0578294488 0.0481817761 0.0833750048 -0.0128111852 -0.0127308501 0.0649482915 -0.0081430155 -0.0087750951 0.1003385698 0.0012897621 -0.0092831847 0.0987999278 0.0182655241 -0.0004717138 0.1155101489 -0.0023419804 -0.0127626168 0.1119693053 0.0282600865 0.0034431017 0.0630655820 0.0094516195 -0.0011319483 0.0801483754 0.0223151349 0.0034498582 0.0481326635 0.0129823331 0.0025704655 0.0789660138 0.0355787057 0.0103815394 0.0127652021 -0.0022942294 0.0091487626 -0.0179953045 0.0001433732 0.0300060867 0.0259322080 0.0108030761 0.0051361666 0.0089721552 0.0267442221 0.0208723863 0.0492508694 0.0080564760 -0.0087205731 0.0189734367 0.0363319698 0.0178985497 -0.0347595388 0.0172554466 0.0455507726 -0.0215854338 0.0304250985 0.0415839064 -0.0591905094 0.0194247554 0.0615173370 -0.0349587188 0.0431471082 0.0543692693 -0.0421103256 -0.0492112606 0.0125183114 -0.0143013019 -0.0803995761 0.0270499841 -0.0848436186 -0.0565356345 0.0268766209 -0.0337184058 -0.0220347903 -0.0082501836 -0.0404678104 -0.0360810145 -0.0083535184 -0.0394785370 -0.0561932929 -0.0275141742 -0.0491121001 -0.0127242656 -0.0169528114 -0.0321563013 -0.0401922297 0.0141246171 -0.0064118847 -0.0020663295 -0.0350339725 0.0114879906 0.0004896321 -0.0244420191 0.0068065299 0.0013590209 -0.0198524807 -0.0012883621 0.0024362354 -0.0089444606 -0.0053954400 -0.0017821896 -0.0211933044 -0.0042258363 0.0024543202 -0.0120502192 -0.0051106844 0.0035231012 -0.0073694806 -0.0011338366 0.0044372030 -0.0248264870 -0.0040519965 0.0031917335 -0.0179562003 0.0013713715 0.0046908187 -0.0319288113 -0.0051738371 0.0003057371 -0.0086834718 -0.0026828688 -0.0046306557 -0.0132813591 -0.0020905160 0.0160394997 0.0035780841 0.0277024501 0.0246343864 0.0177134269 -0.0317478627 0.0338981873 0.0113288031 -0.0194991303 0.0033066172 0.0068306730 0.0932133808 -0.2332899557 0.1778053330 0.0569772079 -0.1760669457 0.1386771279 -0.0208346102 -0.0402118463 0.0452107878 0.0745879164 -0.1890920617 0.1198279360 -0.0103750475 -0.0865357247 0.1083616745 -0.0490595862 -0.0196008568 0.0614852312 0.0322271850 -0.1180387012 0.0702339807 0.1231102536 -0.2541260251 0.1418473634 -0.0305089654 -0.0716008549 0.1248364075 -0.0921897799 0.0378867449 0.0436786632 -0.0214625566 0.0024623871 0.0145782362 -0.0130716130 0.0221775506 0.0173705691 -0.0214789283 0.0274310214 0.0334835058 0.0060108226 0.0420172234 0.0116554178 0.0428702547 0.0973016639 -0.0026011848 0.0191168182 0.0578919227 0.0345964820 0.0136503594 0.0501323540 -0.0170322464 0.0337429378 0.0767758860 -0.0248234760 0.0362476040 0.0879209337 0.0271800966 0.0139154650 0.0495429433 0.0592601436 0.0046302509 0.0349103114 -0.0362890403 0.0409617095 0.0819017756 -0.0501140841 0.0440271990 0.1029747055 0.0450365428 0.0559163625 0.1201880874 -0.0085548518 0.0531014218 -0.1361504028 0.0461310295 0.0159908814 -0.0754439457 0.0349677393 -0.0056667034 0.0051708395 -0.0089230995 -0.0000313253 0.0185517970 0.0063098964 -0.0001012340 0.0243434353 0.0034876541 0.0045105153 0.0175435509 0.0081804275 -0.0008631407 0.0162199431 0.0375825129 -0.0668336402 0.0443570933 0.0569033747 0.0261388772 0.0215555147 -0.0238937134 0.0416259253 -0.0238923423 0.1083566706 -0.0049004116 0.0323507529 -0.0015647080 -0.0054001446 0.0364125145 -0.0036980334 -0.1178874072 0.0156368776 0.0110492646 -0.0162085125 0.0410938811 0.0627190011 -0.1027229197 0.0894973208 0.1093661587 0.0139734370 0.0283777873 -0.0497519028 0.0659181426 0.0191084977 -0.0238133707 0.0185399857 0.0238290974 -0.0317801048 0.0461457928 -0.0300068237 0.1308067487 0.0231781465 -0.0161532551 0.1516078377 0.0855243911 -0.0541076558 0.0918518763 -0.0009550318 0.0375139589 -0.0055163072 -0.0079447737 0.0353532160 -0.0023364015 -0.0082171700 0.0402711611 -0.0051449657 -0.0143270523 -0.0099368048 -0.0646059888 0.0235975150 -0.0472339194 -0.0634058829 0.0186682355 -0.0584722178 -0.0921912962 -0.0276639966 -0.0269763997 -0.1235499279 -0.0665210216 0.0092878158 -0.1244047340 -0.0597720018 0.0152623293 -0.0934153317 0.0574154333 -0.0704924481 -0.0418630888 0.0489318310 -0.0879438231 -0.0923051234 -0.0362399242 -0.0265735919 -0.1568410484 -0.1017250233 0.0331177456 -0.1493534827 -0.0913418470 0.0409655842 -0.0922025255 0.0218702377 0.0243455807 -0.0118427722 0.0211184277 0.0282864737 0.0035660092 -0.0089350282 0.0129565254 0.0214213318 -0.0368229223 -0.0054859091 0.0235212143 -0.0349291156 -0.0087176969 0.0078988292 0.0439912966 0.0360787534 -0.0240148083 0.0425999359 0.0418505745 0.0032281021 -0.0121399837 0.0140243708 0.0405900326 -0.0598762622 -0.0172250550 0.0373209484 -0.0571734491 -0.0225817900 0.0096552943 -0.0733997715 0.0039244802 -0.1683692521 -0.0075706114 -0.0549977305 -0.1709694824 -0.0379610721 0.0011201993 0.0508082894 0.0107983235 0.0280082965 0.0455975546 0.0168531089 0.0037880536 0.0046709567 0.0108198948 0.0051008991 0.0041795724 0.0345004881 0.0040808208 0.0303499817 0.0463555792 0.0054057491 0.0538224331 0.0392341852 0.0030028406 0.0321001686 0.0609665245 0.0055221272 0.0751285079 0.0211477294 0.0066171864 0.0232831692 0.0390160357 0.0068063206 0.0488069686 0.0164021097 0.0073008568 0.0188189025 0.0478109787 0.0080934417 0.0652483186 -0.0069282866 0.0064580048 -0.0062253720 -0.0030733006 0.0063200089 -0.0187306239 -0.0125042111 0.0102779328 0.0070660443 -0.0131299246 0.0129831308 0.0055143617 -0.0165667280 0.0110386378 0.0190990578 -0.0178780934 0.0157086909 0.0162605308 -0.0028918295 0.0091408092 -0.0216579571 -0.0075657042 0.0122450641 -0.0099395429 0.0003328067 0.0089044655 -0.0326054000 -0.0076011712 0.0142357611 -0.0117963873 0.0036393052 0.0119703610 0.0087981591 -0.0028805092 0.0207491748 0.0080599661 0.0149032090 0.0066218393 -0.0023161323 0.0045284302 0.0018195944 0.0219797886 0.0024543795 0.0127764548 0.0025027553 0.0048233021 0.0060938527 -0.0049762765 0.0008829197 0.0215386927 -0.0020023047 0.0017180360 0.0053151575 0.0122144545 0.0219041414 -0.0104657485 -0.0320802880 0.0437692776 -0.0102050177 -0.0086153149 0.0337957110 -0.0077218353 -0.0169367397 0.0121672782 -0.0023809084 -0.0294051607 0.0111220015 -0.0073793616 -0.0380182616 0.0108248381 0.0028376376 -0.0156121297 0.0084354267 -0.0029457736 -0.0196180208 0.0231315818 -0.0055434891 -0.0080595020 0.0217868280 0.0022100450 -0.0128368676 0.0292316200 -0.0062030169 -0.0066441642 0.0059456555 0.0131391613 -0.0169082695 0.0068937068 -0.0129621916 -0.0377525446 0.0041904264 0.0014444237 -0.0232558083 0.0041181851 -0.0129804293 -0.0024888293 -0.0021672668 0.0155336613 -0.0345908853 -0.0156335696 0.0384644527 -0.0006059018 0.1185886034 -0.0215672825 0.0268355921 0.0911927957 -0.0118443852 0.0202306117 0.0226515694 0.0091200451 0.0075785384 0.0172950039 0.0513884882 -0.0063502775 0.1295229039 -0.0599956121 0.0379806320 0.0932921841 -0.0472304367 0.0300042654 -0.0183227398 0.0625210914 -0.0138281012 -0.0141976245 0.0926411801 -0.0208959091 0.1862047902 -0.1061072291 0.0575441667 0.1218810065 -0.0810979411 0.0419684549 -0.0051634093 0.0083626064 0.0086946470 -0.0194745625 -0.0399752974 0.0138073357 0.0055689256 -0.0780534734 0.0095375912 -0.0518748756 -0.0313061553 0.0104657581 -0.1859254833 0.0587321012 -0.0113219549 -0.1035742254 0.0117337925 -0.0254626568 -0.0577695228 -0.0383245924 0.0373005008 -0.1265347476 0.0054663784 0.0273289337 -0.1727436523 0.0584195929 -0.0371894393 -0.0966322040 0.0156900180 -0.0464010679 -0.0121732557 -0.0743863158 0.0667382018 -0.1344248969 0.0010640091 0.0527854649 -0.2171480909 0.0962622944 -0.0653510535 -0.2399178041 0.0979681652 -0.0202313235 -0.0933800705 0.1252024574 -0.0382830807 -0.0518865600 0.0983361144 -0.0407544058 0.0295138099 0.0116832227 -0.0148940718 -0.0966719547 -0.0598297657 0.0377920400 -0.0640379066 -0.0238755968 0.0478523156 -0.0239972738 -0.0117385780 0.0176066810 0.0175961838 -0.0227521772 0.0127911821 0.0099669191 -0.0075979438 0.0196842515 0.0342121003 -0.0480723364 -0.0238218929 0.0561348941 -0.0000149643 0.0407867304 -0.0711494564 0.0076158247 0.0891019396 -0.0460270148 0.0682027387 0.0837951501 0.0002579988 -0.0141899760 0.0114843146 0.0293777968 -0.0090235864 0.0300005987 0.0026699664 0.0132675160 0.0237943746 0.0088347105 -0.0943005031 -0.0101186812 0.0460741320 0.0064747434 -0.0058695968 0.0656082299 -0.0568937516 -0.0815544027 0.0873901334 -0.0082986145 0.0435763466 0.0470155674 0.0284800120 0.0616882447 0.0620544672 -0.0067749193 0.0370516338 -0.0303962075 0.0671301791 0.0416177948 -0.0321405273 0.1011821462 0.0793769911 -0.0572949637 0.0828854018 0.1266504093 0.0242743224 -0.0124599939 -0.0285902003 0.0305514895 -0.0368598995 -0.0095319395 0.0300331319 -0.0312026172 -0.0037343741 0.0216243035 0.0038987139 -0.0202268644 0.0173048984 0.0262945004 -0.0370405747 0.0192934817 0.0147344267 -0.0395871710 0.0348099414 -0.0620233084 0.0002634455 0.0363213033 -0.0533018800 0.0115029550 0.0174123965 0.0210464164 -0.0185557147 0.0118704387 0.0521983216 -0.0487964002 0.0160615538 0.0297652212 -0.0520954070 0.0290520261 0.0075240879 -0.0112621460 0.0322656068 0.0125019518 -0.0112388895 0.0363985310 0.0213204305 -0.0146455140 0.0397783003 0.0291738254 -0.0198390173 0.0367582658 0.0243142105 -0.0199968902 0.0249131139 -0.0011155077 -0.0083919072 0.0301800700 0.0076395483 -0.0079025674 0.0324170736 0.0166048958 -0.0093806688 0.0428449851 0.0367303444 -0.0223143326 0.0386126056 0.0288335460 -0.0233778716 0.0022736512 0.0865697618 -0.0256074407 0.0286693350 -0.0314863042 -0.0103248009 0.0293012614 0.0185210359 -0.0080282191 0.0317355870 0.0091893397 -0.0052152639 0.0379602244 -0.0025948968 -0.0047065136 0.0263389968 0.0000667332 -0.0133462526 0.0583705258 -0.0012023181 0.0233961451 0.0677063249 0.0019844487 0.0431051088 0.0680128433 -0.0033247334 0.0310421607 0.0845493982 0.0025342084 0.0670026259 0.0344085485 0.0033058600 0.0029105193 0.0552981353 0.0042264642 0.0315530869 0.0254727678 0.0048478777 -0.0051180915 0.0624647831 0.0065761524 0.0458375708 0.0058003044 -0.0109242717 -0.0068494963 0.0142230259 -0.0122681803 -0.0012925718 -0.0075296309 -0.0183158654 0.0050712390 -0.0117792560 -0.0265618076 0.0208054060 -0.0152144881 -0.0173427119 0.0043820496 -0.0232758577 -0.0323438753 0.0309567151 0.0108554873 -0.0206487271 0.0131097664 -0.0018165547 -0.0277347034 0.0243035172 0.0175654091 -0.0212888672 0.0164741572 -0.0049809939 -0.0341937500 0.0364327455 -0.1399881781 -0.0824983803 0.0768920649 -0.1425130337 -0.0552596287 0.1227546325 -0.1465536213 -0.1010115916 0.0615466686 -0.1657905900 -0.1139327396 0.0795701385 -0.1122847123 -0.0570343344 -0.0149033266 -0.1492613408 -0.0404091993 0.0090257965 -0.0719499481 -0.0757111324 -0.0260245489 -0.1302065158 -0.0474871161 -0.0625072995 0.0027093294 -0.0208184157 0.0156984162 -0.0025717308 -0.0187411939 0.0027877521 -0.0021185079 -0.0188648762 0.0055099124 -0.0060300108 -0.0156267259 0.0047380018 -0.0006408619 -0.0204374947 0.0118014100 -0.0208162851 -0.0218301024 -0.0039051635 -0.0147508025 -0.0130266356 -0.0004709981 -0.0421177920 -0.0119437147 -0.0028962538 -0.0384548023 -0.0200861765 -0.0045189606 -0.0480899747 -0.0112652746 -0.0053246614 -0.0144320040 -0.0389181968 0.0005344705 -0.0033376516 -0.0246932954 0.0133415174 -0.0059500882 -0.0242140973 0.0182096211 0.0158454570 -0.0131599509 0.0205630031 -0.0229413363 -0.0156999545 0.0236145192 -0.0230047521 0.0002991531 -0.0360143795 0.1460684722 -0.0266232716 -0.0299774617 0.1062126093 -0.0170709643 -0.0364915868 0.0076534648 0.0022521421 -0.0487098883 0.0886023140 -0.0043847449 -0.0163682260 0.0721160594 -0.0169957139 -0.0642762839 0.0226765319 -0.0076539339 -0.0692984079 0.0381157945 0.0054538233 -0.0224278888 0.1142956701 -0.0032152670 0.0060141128 0.0841249129 -0.0255172817 -0.0810879038 -0.0044507231 -0.0082346950 -0.0893018643 -0.0182558541 0.0014423753 -0.0504572199 -0.0194112705 -0.0100248036 -0.0446706887 -0.0177825413 -0.0192287213 -0.0325775484 0.0030802650 -0.0050881347 -0.0465886744 0.0818486109 0.0060089932 -0.0509367491 0.0267520749 -0.0008355993 -0.0178125535 0.0131240270 0.0009581775 -0.0786720132 0.0552691785 0.0059141360 -0.0811638529 0.0671039745 0.0047490585 -0.0195744898 0.0168970456 -0.0033954481 0.0076798211 -0.0105225895 0.0011454962 -0.1048799746 0.0671056471 0.0073832567 -0.1103175718 0.0870975265 0.0067017905 0.0043498536 0.1129728298 0.0074434014 -0.0518367456 0.0252577770 0.0173131300 -0.0005675820 0.0096634158 0.0083300627 0.0076468369 -0.0417476077 -0.0212419678 0.0022008983 -0.0454494619 -0.0162321404 -0.0301639608 -0.0075408134 0.0043583065 -0.0088391492 0.0340096440 0.0068113518 -0.0297180008 0.0495349012 0.0023752297 -0.0301806320 -0.0575712160 0.0200139396 -0.0117303367 0.0939852659 -0.0062526984 -0.1334188299 0.1331614449 -0.0107757974 0.0680081292 -0.0078859544 0.0224025865 0.0369011034 0.0397315051 0.0400035448 0.0657846418 -0.1164620660 0.0024683587 -0.0716279928 -0.0243770948 0.0180175937 -0.0095109061 -0.0981027638 0.0490354065 0.0601371276 0.0669713972 -0.0081394883 -0.1710306136 0.1546681691 -0.0075859258 -0.1322794458 0.0952620694 -0.0066173434 -0.1475871484 0.1584276723 -0.0173577991 0.0697901815 0.1015407211 0.0046591102 0.1418582449 0.1988733465 -0.0289198044 0.0591462061 0.0471273835 0.0427148146 0.0698631556 0.0761308201 0.0401471398 0.0451936682 0.0314787137 0.0506716075 0.1050998776 0.0040723802 -0.0139260282 0.0268128271 -0.0232022282 0.0222827902 0.0165771344 -0.0274857917 0.0428873297 0.0236691559 -0.0024676863 0.0247729971 0.0410070638 0.0260050267 -0.0132050507 0.0521190608 0.0297674112 -0.0321781279 0.0445127559 -0.0415350736 0.0368609999 0.0041712688 -0.0484329809 0.0704517209 0.0171925059 -0.0053097754 0.0434520150 0.0481472594 0.0453101826 -0.0271689853 0.0661581918 0.0529011685 -0.0595741706 0.0519575028 0.0368362787 0.0632873248 -0.0344430588 0.0446038574 0.0799394608 -0.0207629441 -0.0303079401 0.0131732350 0.0278830597 -0.1116951937 -0.0725160838 0.0624299514 -0.1185154370 -0.0886078828 0.0490726268 0.0929385668 0.1203415044 -0.0677614588 0.1065113745 0.1432049106 -0.0438674151 -0.0234361050 0.0310148016 0.0484214355 -0.1675614286 -0.1249118848 0.0983412171 -0.1840431503 -0.1528884875 0.0765460380 0.0096871974 0.0180021913 0.0533761640 -0.0220069016 0.0841119431 0.0482132696 -0.0551713840 0.0166660356 0.0609518605 0.0128050319 0.0597271470 0.0525439143 -0.0066139370 -0.0147144465 -0.0021177693 -0.0070810570 -0.0141105613 0.0013180334 -0.0106150713 -0.0112569253 -0.0132603447 -0.0145619078 -0.0080501577 -0.0185565463 -0.0104933494 -0.0113645378 -0.0174892554 -0.0180928618 -0.0056151234 -0.0275071469 -0.0096101993 -0.0110409376 -0.0009888773 -0.0133573491 -0.0081049866 -0.0110829388 -0.0092063390 -0.0107213001 0.0050525694 -0.0155267243 -0.0057816088 -0.0133418947 -0.0233625955 -0.0029809525 0.0043424120 -0.0384686900 -0.0015369130 0.0047229283 -0.0205439918 0.0067335266 0.0113851224 -0.0341043016 0.0186104996 0.0247800422 -0.0084891830 0.0052177207 0.0068392038 -0.0320670917 0.0266453015 0.0319684103 -0.0512209400 0.0106416342 0.0172804986 -0.0502724229 0.0206110025 0.0290481565 -0.0628909398 0.0117128078 0.0189552512 -0.0611681618 0.0298058234 0.0405655722 -0.0878631371 -0.0248927495 0.0002493893 -0.0932208309 0.0007660569 0.0353283843 -0.0897623727 -0.0332581595 -0.0071963650 -0.1134472938 -0.0517499030 -0.0024851274 -0.0557005234 -0.0208348826 -0.0790070665 -0.0798889413 -0.0321132927 -0.0851757778 -0.0359056017 -0.0051390728 -0.0990717680 -0.0618233620 -0.0243411920 -0.0851325251 -0.0186652230 0.0248299633 0.0310667618 -0.0194681902 0.0267165140 0.0233698281 -0.0201749435 0.0267892715 0.0247653756 -0.0186749400 0.0246227430 0.0305351192 -0.0183401696 0.0250776657 0.0312531820 -0.0017809517 0.0284802142 0.0212370530 -0.0110464844 0.0230810343 0.0292143072 0.0303718700 0.0196318394 -0.0101068671 0.0198071779 0.0292903022 0.0009671914 0.0482216454 0.0192983356 -0.0287882558 -0.0042424391 0.0323993826 0.0218446027 -0.0187205976 0.0282957427 0.0248226430 -0.0085398641 0.0239925510 0.0114752978 -0.0152704696 0.0235177200 0.0057198846 -0.0015912677 0.0190301057 0.0108218940 0.0163724136 -0.0742652570 0.0084766752 -0.1952096482 0.1271720042 -0.1302735899 -0.1384849922 0.0717394963 -0.0924026123 -0.0064987491 -0.0543761062 -0.0035090000 -0.0815908400 0.0206062983 -0.0516084442 -0.1208367836 0.0488180835 -0.0840349506 -0.0528207787 -0.0163413481 -0.0399049636 -0.0118565687 -0.0448780751 -0.0053628111 -0.0908787768 0.0337978436 -0.0556334982 -0.1612595373 0.0826929731 -0.1139258640 -0.0453131149 -0.0318678638 -0.0387791317 0.0188902008 -0.0844254816 0.0194436733 0.0206035017 -0.0769295982 0.0211409032 0.0197862287 -0.0807193718 0.0329748626 0.0185308336 -0.0433591447 0.0098193237 -0.0251380542 0.1045260729 -0.0278316575 -0.0075495706 0.0212301828 0.0141699202 0.0265031081 -0.0412663066 -0.0112177792 0.0064566469 0.0326973917 -0.0307851416 -0.0303665084 0.0968975702 -0.0050593472 -0.0144445647 0.0183577910 0.0334893024 0.0436715507 -0.0908759918 -0.0198246433 0.0118171705 0.0371108051 -0.0510531491 -0.0545405103 0.1515313905 -0.0002380016 -0.0456547254 0.1655266747 -0.0427403724 0.0453945805 -0.0931880953 0.0274835699 0.0171243805 -0.0759578642 0.0296570711 0.0355087274 0.0456697492 -0.0109498796 0.0116155370 -0.0984258367 -0.0074424923 0.0172752997 -0.0880224550 -0.0088061460 0.0286930620 -0.0951421951 -0.0074814048 0.0404572057 -0.1020573559 0.0387204999 0.0362194472 -0.0534424433 0.0594292638 0.0569987547 -0.0746352425 -0.0041732150 0.0563542458 -0.1524779787 0.0869221423 0.0106781271 -0.0755460678 -0.0123637305 -0.0015238432 -0.0492192978 -0.0325345982 0.0131665707 -0.0779166891 0.0434369513 0.0923602497 -0.0573804333 0.0836971702 0.0183941998 0.0063890311 0.0644096519 0.0367594374 -0.1470199868 0.0466847198 0.0763500191 0.0526142920 0.0375902130 0.0790834909 -0.0797684016 -0.1346787085 0.0592233390 -0.1643635608 0.1368204113 0.0484765102 -0.1331491683 0.1053610906 0.0751678635 -0.2018224703 0.0586928199 -0.0063102895 -0.0552716965 -0.0678418016 -0.0104154070 -0.0170217918 -0.0242261250 0.0019405120 -0.0541432026 -0.0218458400 -0.0178835415 0.0178901428 0.0273360834 -0.0024533517 0.0024144692 0.0278141145 -0.0030333693 -0.0046307708 0.0165998004 -0.0197135095 0.0016626882 0.0070417929 -0.0342836781 0.0130971473 0.0087979362 -0.0336897920 0.0219385301 0.0188537475 0.0092766574 -0.0009096580 0.0338115530 0.0055553432 -0.0081318584 0.0116778038 -0.0279424947 0.0107829377 -0.0154567636 -0.0478120886 0.0195325403 0.0001372609 -0.0469356099 0.0332310477 0.0191437361 0.0663675238 0.0864347034 -0.0327535742 0.0750015283 0.0984077790 -0.0386563144 0.0546011675 0.0714309156 -0.0241614596 0.0294982955 0.0379530008 -0.0071536335 0.0196128836 0.0250531675 -0.0004710210 0.0810209057 0.1079212340 -0.0419783942 0.0941759281 0.1246163676 -0.0518272645 0.0518680016 0.0690078107 -0.0204320505 0.0147618253 0.0188958634 0.0028859785 -0.0026666418 -0.0036537099 0.0151701215 -0.0551326106 0.0377370377 -0.0241897483 -0.0083440026 -0.0059801933 -0.0263001121 0.0323264075 0.0431899970 -0.0123258210 0.0685233248 0.0890425677 -0.0230297960 -0.0261069030 0.0284280624 0.0138002230 -0.0247885464 0.0277062620 0.0185692039 -0.0368207468 0.0320663932 -0.0075163169 -0.0474765337 0.0360738469 -0.0246993017 -0.0377441802 0.0322017570 -0.0123122912 -0.0569675497 0.0392416476 -0.0435126533 -0.0340352351 0.0320824093 0.0051796128 -0.0458735054 0.0359660732 -0.0175464961 -0.0334513359 0.0320982127 0.0100323604 -0.0542472145 0.0389242666 -0.0303300118 -0.0017374519 0.0144232449 0.0196646350 0.0198502055 0.0124740450 -0.0006884359 -0.0095648403 0.0073814244 0.0229757513 0.0030287258 -0.0013942126 0.0083365271 -0.0251633319 0.0091983904 0.0350126110 -0.0028227091 -0.0061806856 0.0111297415 0.0325979087 0.0031863259 -0.0157859537 0.0242050996 -0.0038753890 -0.0114404673 0.0498172760 0.0016858426 -0.0316093475 0.0343745066 -0.0110749759 -0.0235362907 0.0019633937 -0.1064966178 0.0024232028 0.0325638534 -0.1409374073 0.0181495282 -0.0466840862 -0.1097047068 0.0239968287 0.0080322664 -0.0749139811 -0.0270368687 0.0073422983 -0.0961830844 -0.0181005660 -0.0020044453 -0.0984228698 -0.0187466950 0.0088793190 -0.0905444807 -0.0221947521 0.0100098873 -0.0924014260 -0.0186335815 -0.0012628900 -0.0037413795 0.0046838660 -0.0045728869 -0.0082095749 0.0174091307 -0.0029912819 -0.0083219369 0.0101857124 -0.0051786498 -0.0058861362 -0.0151237130 -0.0023091975 -0.0034467984 -0.0061551978 -0.0144363744 -0.0090470108 -0.0217629814 -0.0091646621 -0.0044865348 -0.0237589154 -0.0347739230 -0.0015100241 -0.0064380496 -0.0251611939 -0.0100693478 -0.0156544254 -0.0489100008 -0.0009808530 0.0044394054 -0.0182779246 -0.0115403434 -0.0130832059 0.0011886736 -0.0026786475 -0.0025151063 -0.0053432770 0.0053780958 0.0103625202 0.0203434776 0.0128701622 0.0228365158 -0.0339901681 0.0149350203 0.0261396550 -0.0279922157 -0.0135142329 -0.0298907811 0.1525606605 -0.0534253841 -0.0129252664 0.1058848888 -0.0382721750 -0.0232610424 -0.0041524876 -0.0071021688 -0.0418188527 0.1057349584 -0.0415142461 0.0084249637 0.0437226422 -0.0136849073 -0.0672115959 -0.0106083847 0.0004376542 -0.0756884811 0.0480313613 -0.0235776493 -0.0026288488 0.1516595796 -0.0572852427 0.0430488311 0.0388939865 -0.0083591260 -0.0924334998 -0.0567150899 0.0135082190 -0.1067018563 -0.0242060393 -0.0107501650 -0.0407092135 -0.0200208854 -0.0198608881 -0.0255951793 -0.0240011471 -0.0186008139 -0.0156256014 0.0069404069 -0.0187588449 -0.0268968551 0.0732460653 0.0230963057 -0.0382971003 -0.0006623189 0.0356493447 -0.0074800706 0.0441177577 -0.0500883792 -0.0514833401 0.0807450572 -0.0299629590 -0.0581928242 0.0323436230 0.0578143985 -0.0135523763 -0.0318636096 0.0600208562 0.0140102459 0.0452494001 -0.0903788272 -0.0723717460 0.1119360491 -0.0547878921 -0.0836860682 0.0250966956 0.1000188064 0.0031608027 0.0977748374 0.0372206301 -0.0422638406 0.0528800297 -0.0276051503 0.0223752746 0.0166141336 -0.0115091075 0.0280221831 -0.0306902235 -0.0173916661 -0.0156538662 -0.0276070683 -0.0045652585 0.0147244991 -0.0054318028 -0.0047990433 0.0341258270 0.0265256431 -0.0290593648 0.0449383587 0.0271895962 -0.0328389488 0.0918140083 0.1466207594 -0.0189821543 0.0856398183 -0.0187612879 -0.0553307125 0.1967653754 -0.0452591670 -0.0298908080 0.0125491726 -0.0131696152 0.0145754836 0.0412687463 0.0034717982 0.0194727229 0.0520222484 0.2151245319 0.0108267112 0.1502071324 0.1023430932 -0.0174326641 0.0994185420 0.1952714908 -0.0499569632 -0.0029108407 -0.0014462798 -0.0737210887 0.2421290392 -0.0879852226 -0.0402240180 0.1997509070 -0.0013027554 -0.0602033201 0.1985974568 -0.0415158494 -0.0394436474 0.0517680124 -0.0128029518 0.0005217758 -0.0637544563 -0.1281420208 -0.0469772158 0.0003791296 0.0055148477 0.0201617629 0.0531827697 0.0158773627 0.0196611589 0.0448149803 0.0006532788 0.0231170444 0.0652472887 -0.0025551526 0.0038318532 0.0077442052 -0.0215414423 0.0358881986 -0.0062032495 -0.0287861399 0.0570389979 -0.0095693673 -0.0146502011 0.0434169938 0.0013278779 0.0077529966 0.0042517444 0.0185521461 0.0141360128 -0.0140522913 0.0209570243 -0.0312386870 0.0482595558 -0.0143021956 -0.0448156061 0.0848340650 -0.0207023869 -0.0267367519 0.0796915312 -0.0102279387 0.0179989590 -0.0065430691 0.0271246161 0.0317809345 -0.0399399829 0.0317096186 -0.0946831877 -0.0964681317 0.0241684198 -0.0888728349 -0.0919733771 0.0141552793 -0.0185117232 -0.0092606844 -0.0342909131 0.0410782272 0.0628289015 -0.0679879217 0.0348863537 0.0556335723 -0.0573265363 -0.1466637991 -0.1621946552 0.0560692207 -0.1350032845 -0.1464919295 0.0381151261 -0.0027110438 0.0120951937 -0.0533783664 0.0937646355 0.1264788018 -0.1035235181 0.0848148702 0.1125973635 -0.0860986041 -0.0293672334 0.0644747431 -0.0104179297 -0.0341232528 0.1269005628 -0.0201894045 0.0455870236 0.0718438422 -0.0726856861 -0.0379890816 -0.0315345075 -0.0477828883 -0.0023525114 -0.0122780514 0.0084235516 -0.0042614595 -0.0115820553 -0.0056685019 0.0013508924 -0.0179116082 0.0227085932 0.0039594956 -0.0234383738 0.0237609294 0.0026877743 -0.0180087421 0.0340125844 0.0075639558 -0.0278561758 0.0358669491 -0.0022064301 -0.0177437201 -0.0058571538 0.0020742354 -0.0234656970 0.0090765983 -0.0031810221 -0.0178800170 -0.0156393881 0.0043470654 -0.0281872094 0.0098730912 -0.0152030018 0.0031362253 -0.0191299596 -0.0297499038 0.0044562697 -0.0073199708 -0.0109319990 0.0092369598 -0.0182377786 -0.0221510208 0.0166687348 -0.0048251098 0.0007835886 0.0078581150 -0.0265010731 -0.0192348911 0.0208691348 -0.0038874741 -0.0413986935 0.0123945797 0.0066342185 -0.0377175421 0.0184701779 0.0086023769 -0.0539872904 0.0134896543 0.0163328262 -0.0469136261 0.0243447298 0.0201540389 -0.0533995080 0.0151945316 0.0182130969 -0.0626088657 0.0314087317 0.0247898023 -0.0450384911 0.0248728880 0.0237847193 -0.0703639929 0.0026193998 0.0097607531 -0.0263164873 -0.0133910564 0.0004790124 -0.0333519363 -0.0049099963 0.0103144322 -0.0082184306 -0.0244541958 -0.0026484503 -0.0378295890 -0.0156684292 -0.0167770681 0.0181839197 -0.0147266867 -0.0418852589 0.0387110232 -0.0076206013 -0.0406928844 0.0305783058 -0.0058395115 -0.0339716727 0.0032479291 0.0023112358 -0.0117394853 0.0028097660 -0.0120090734 -0.0277273297 -0.0078220337 0.0088381460 0.0270048189 -0.0041106548 0.0011050604 0.0092569594 0.0283297872 -0.0021058012 0.0038556374 0.0142783131 0.0080758636 0.0232042392 0.0423212558 -0.0026719455 -0.0061602734 -0.0194402912 0.0247321490 0.0338763518 -0.0045865768 -0.0329304498 -0.0086959235 -0.0161490518 0.0054590895 0.0316230851 0.0070367076 -0.0114851337 0.0777060134 -0.0466495781 0.0432627580 0.0128982723 -0.0672927486 0.0224400915 -0.0214644591 -0.0207080606 -0.0707804695 0.0433031421 -0.0339962732 -0.0497823988 0.0289002526 -0.0636092301 0.0014942818 -0.0092293839 -0.0034404559 -0.0754684469 0.0355919807 -0.0817370738 0.0015676749 0.0044483132 -0.0950263084 0.0255648694 -0.0126737631 -0.0187775955 -0.0485580539 0.0171845013 0.0332126972 -0.1169099946 0.0545374449 -0.1059936749 0.0210679928 0.0003049764 -0.1273392953 0.0590076746 -0.0275828753 -0.0660611310 0.0248286216 -0.0279215319 -0.0649429782 0.0185624427 -0.0247594687 -0.0655799412 0.0198726402 -0.0230091657 -0.0508379477 0.0041505784 -0.0223490148 0.0463929788 -0.1281133015 0.0083993844 -0.0190619268 -0.0414166592 -0.0095419990 -0.0414484439 -0.0069945128 -0.0234771321 0.0062083857 -0.0719180742 -0.0068906834 0.0317201273 -0.1099582240 0.0070993252 -0.0253510107 -0.0322721386 -0.0124183551 -0.0647752547 0.0232351564 -0.0331651298 0.0159985815 -0.0844089581 -0.0063774704 0.0623246700 -0.1503472311 0.0180253372 0.0885033841 -0.1852227996 0.0219513461 0.0138114947 -0.0763794342 0.0255796009 -0.0188469285 -0.0410943065 0.0231838785 0.0296807100 0.0257177036 0.0159401807 -0.0832479776 0.0158576452 -0.0464655030 -0.0821235384 0.0061055149 -0.0427468187 -0.0899151227 0.0109460099 -0.0435331806 -0.0674214439 0.0011298674 -0.0034558551 -0.0800064289 0.0779976426 0.0302661640 -0.0410262348 -0.0226271862 -0.0573199920 -0.0298738746 -0.0383659306 0.0617751116 -0.0761250701 -0.0075130354 -0.0373394019 -0.0672300152 -0.0331138256 -0.0207512565 -0.1386651906 0.0253139215 -0.0131860925 0.0362686000 0.0699180155 0.0715434400 -0.1245011163 0.1961086399 0.0599948136 -0.0578024114 -0.0162028869 -0.0895807859 0.0003230987 -0.0364748465 -0.0608541070 -0.0348310176 -0.0236561083 -0.0544990491 -0.0252278381 -0.0468829487 0.0945076639 -0.0439144040 -0.0252382461 0.0942859267 0.0020044826 -0.0755061974 0.0408202394 -0.0665571895 -0.0288056436 0.0096742095 -0.0603883172 -0.0588283732 -0.0271027740 -0.0683802700 -0.0314636107 -0.0304020512 0.0224637956 -0.0161382584 -0.0331886528 -0.0209514451 0.0444069148 -0.0519959952 -0.0183854026 0.0548185805 -0.0275205794 0.0333368728 0.0030418963 0.0138660435 0.0786990473 -0.0565882591 0.0306469436 0.0736523550 -0.0655502275 0.0063960177 -0.0557907862 0.0822406247 -0.0789074377 -0.0525368696 0.0966650797 -0.0354139551 0.0442560026 -0.0006031675 0.0528391269 0.1189259926 -0.0996143063 0.0647048185 0.1122697307 -0.1121031179 0.0194154301 0.0149077530 0.0124458205 0.0201935333 0.0322230591 0.0335816660 0.0007068778 0.0660251698 0.0665207572 -0.0218480887 0.0838184583 0.0808995658 -0.0254974231 0.0659939306 0.0603334767 -0.0064981351 -0.0111468631 -0.0146289534 0.0357491055 0.0178831707 0.0230077497 0.0023096756 0.0749378614 0.0777430424 -0.0402999475 0.1088738974 0.1067057875 -0.0417920198 0.0805342342 0.0710025815 -0.0094323138 0.0986607969 -0.0706398308 0.0708879191 0.0005185373 0.0649177718 0.0674044878 0.0736529770 0.0535030529 -0.0395243843 0.0833002044 0.1084463201 -0.0544007583 0.0413019771 0.0075597153 -0.0022720671 0.0239716282 0.0117165220 0.0016466922 0.0779950046 0.0152494936 0.0404414522 0.0986676449 0.0250690270 0.0862072041 0.0928680742 0.0117769732 0.0413524897 0.1301638905 0.0296577088 0.1253920289 0.0381642280 0.0224838333 0.0328629192 0.0768653111 0.0292416505 0.0784514215 0.0225962806 0.0251319998 0.0247874847 0.0905495229 0.0381134231 0.1087033039 0.0067902761 -0.0091340395 0.0009696627 0.0269073043 -0.0115340626 -0.0082863120 0.0028493721 -0.0178382110 -0.0027671056 0.0235286344 -0.0301059237 -0.0292337576 -0.0155629307 -0.0151318600 0.0154884368 0.0203507674 -0.0375362218 -0.0338997116 0.0480589913 -0.0236737578 -0.0364764413 0.0485386892 -0.0331932027 -0.0501699191 0.0647160821 -0.0251469565 -0.0481924017 0.0661918553 -0.0427436585 -0.0739904982 -0.0776876723 -0.0014034436 -0.0388416202 -0.0698173151 -0.0089304044 -0.0323126894 -0.0886010807 -0.0116987348 -0.0437250001 -0.0711152481 0.0031144536 -0.0358087693 -0.0862419596 0.0185932561 -0.0499602874 -0.0854838137 0.0122180132 -0.0567071200 -0.0939270538 0.0272061542 -0.0509557059 -0.0784484571 0.0177703388 -0.0373501839 -0.0236068717 0.0426067477 -0.0248368438 -0.0427760338 0.0443219843 -0.0516698799 -0.0302688065 0.0409787544 -0.0322379750 0.0025181740 0.0319959882 0.0231221107 -0.0106530676 0.0380438678 -0.0008627323 0.0272658102 0.0357218983 0.0232032389 0.0159045748 0.0283496566 0.0317412578 0.0606267175 0.0278204480 -0.0035648885 0.0516612286 0.0353924232 0.0088403639 0.0740349904 0.0275207216 -0.0161409311 0.0241176784 0.0499841592 0.0146902707 -0.0127213788 0.0373349546 -0.0040860379 0.0018861200 0.0491984164 -0.0100192887 0.0000145679 0.0452110516 -0.0061670568 -0.0029878626 0.0637648883 -0.0232991053 -0.0112641768 0.0076800582 -0.0367957803 -0.0738952092 -0.0286336027 -0.0116753265 -0.0600504278 -0.0249309004 -0.0142777854 -0.0237829906 -0.0106340709 -0.0225381815 -0.0002282553 -0.0765251663 0.0034712194 -0.1020904483 0.0297047572 -0.0331282735 -0.0808181559 0.0331467562 -0.0368358222 0.0187755986 -0.0688495988 -0.0011510224 0.0344142833 -0.1210416583 0.0197540003 -0.1488164983 0.0673795484 -0.0432189611 -0.1100664350 0.0658024859 -0.0498039426 -0.0094432912 -0.0000810827 -0.0295542162 -0.0068590814 -0.0123112845 -0.0179970214 -0.0045225795 -0.0106154138 -0.0243267390 -0.0202982383 -0.0266049329 -0.0160896073 -0.0777737937 -0.0676883687 -0.0062009639 -0.0491287691 -0.0239225337 -0.0469977879 -0.0203542740 -0.0461610776 0.0180764522 -0.0512198927 -0.0671272951 0.0244709069 -0.0777698174 -0.0463433194 -0.0417953832 -0.0501898541 -0.0052961404 -0.0772116514 -0.0012151658 -0.0435229266 0.0409759406 -0.0536667213 -0.0819299973 0.0565861478 -0.0997429697 -0.0453699972 -0.0663596587 -0.0987276061 -0.0836782161 -0.0018455779 0.0837351597 -0.1244383585 0.0090033148 0.0363428213 -0.0701932327 0.0039199899 0.0492307743 0.0297313952 0.0074731702 -0.0304206612 -0.0051828477 -0.0160473775 0.0210068143 0.0154182081 0.0132162625 0.0880749455 -0.0080196697 0.0099322934 0.0731992396 -0.0021742592 -0.0313360057 -0.0195743850 -0.0639631513 -0.0476500720 0.0839665580 -0.0167763786 -0.0630492827 0.1204794227 0.0328438101 -0.0010978522 0.0035031400 0.0633312478 0.0479045664 0.0542630596 0.1036995791 0.0697843345 -0.0285952956 -0.0418633219 -0.0678907058 -0.0839042890 -0.0590153677 -0.0915003715 -0.0222692614 -0.1425079888 0.0026415123 0.0851828506 0.0207777083 -0.1028087838 0.0970866655 -0.0876578988 -0.0854276493 0.0680323692 -0.0137426659 0.0047327479 0.1497264975 0.0323330353 -0.0303278873 0.1041586306 0.0457149777 0.0370965130 0.1458173288 0.0517256125 0.0106777671 0.0803277589 0.1105006768 0.0632573829 0.0832359123 0.1028017105 0.0531125127 0.0340128182 0.1305735780 0.1101746510 -0.0250781769 0.0468407774 -0.0261473960 -0.0418565501 0.0731240282 -0.0363804291 -0.0369823779 0.0674917960 -0.0239690483 -0.0139100472 0.0349091911 -0.0023126241 0.0033118975 0.0094934934 0.0066047156 -0.0029687587 0.0172946719 -0.0061359958 -0.0582295275 0.0967458037 -0.0508813880 -0.0504786810 0.0866585194 -0.0295792105 -0.0090553921 0.0295268974 0.0115313786 0.0208661947 -0.0159164688 0.0237412651 0.0114977879 -0.0024286268 0.0011392835 -0.0015825103 -0.0232854463 0.0292634900 -0.0361229133 -0.0742686636 0.0387548805 -0.0159538815 -0.0737535776 0.0282508624 0.0439548893 -0.0089632943 0.0016454081 0.0793802499 0.0439910253 -0.0092908448 -0.0183187411 -0.0336170351 0.0385957400 -0.0799680120 -0.1199429897 0.0559759050 -0.0634572602 -0.1525833092 0.0448927067 0.0585900535 -0.0059007715 -0.0065321251 0.1256372328 0.0878234165 -0.0268787768 0.0121684347 -0.0050438303 0.0187456712 -0.0259628278 0.0611767551 0.0148883367 -0.0588931695 -0.1505600859 0.0430383395 -0.1071704193 -0.2171280898 0.0589661389 -0.0180632899 0.0354680625 -0.0095178078 0.0005488231 0.0310517162 0.0209106149 -0.0218979062 0.0341695701 -0.0129026616 -0.0054841902 0.0289675667 0.0145449075 -0.0373384386 0.0373513486 -0.0365521090 -0.0076751422 0.0278547616 0.0130555853 0.0158328699 0.0266741405 0.0449297091 0.0136996107 0.0256534196 0.0437376903 0.0303807646 0.0239675688 0.0624744095 0.0262996076 0.0228401346 0.0641178803 0.0259279525 0.0198996019 0.0231020405 0.0525190939 0.0180181511 -0.0009748869 0.0163128276 0.0126878225 0.0294611880 0.0356808791 0.0015125352 0.0049027499 -0.0054209407 0.0154012182 0.0507246523 0.0285420435 -0.0044259011 0.0082030360 0.0720620707 0.0062471436 -0.0263227101 0.0650695228 -0.0021009366 -0.0257791034 0.0938755420 0.0043610675 -0.0477707024 0.0812502762 -0.0109238423 -0.0475307219 -0.0875189783 -0.0040352419 0.0177714220 -0.0948749045 0.0268545536 0.0575620974 -0.0911396435 -0.0059459065 0.0175563253 -0.1233749695 -0.0338181146 0.0048846047 -0.0234176092 -0.0412384194 -0.0628415330 -0.0308821552 -0.0383045563 -0.0583624908 0.0181415259 -0.0524136706 -0.0790030550 -0.0520426801 -0.0585198267 -0.0838710036 0.0241281876 -0.0049713399 0.0787301327 0.0525441617 -0.0091511940 0.1248778616 0.0366939940 -0.0048634480 0.0995235459 0.0000105565 0.0069849637 0.0424950020 0.0026364866 0.0014116572 0.0476696379 -0.0076557914 0.0077175767 0.0775851448 0.0029842039 0.0062162849 0.0520551898 -0.0440237968 0.0062737117 0.1495508511 -0.0359309970 0.0053421448 0.1353877301 -0.0644379108 0.0053641943 0.1895904440 0.0173578588 0.0063796461 0.0297776917 -0.0239343943 -0.0045862249 0.0129955705 -0.0096185880 -0.0389791454 -0.0307082894 -0.0706675356 -0.0562452117 -0.0587695072 0.0538291214 -0.0622659546 -0.0630200523 0.0008720977 -0.0048271232 -0.0443419300 -0.0169418765 -0.0786584344 0.0193943209 -0.0159901314 -0.0607825143 0.0071721014 -0.0124404871 -0.0183324219 -0.0238079112 -0.0421684400 -0.0348835284 -0.0312009787 0.0120530167 -0.0629199927 0.0292680519 0.0118145742 -0.0399477836 0.0134890922 -0.0406932560 -0.0148911560 -0.0462102454 -0.0644134012 -0.0327690435 -0.0496169821 0.0331530076 -0.0814314796 0.0585455470 0.0333061664 -0.0384456620 0.0297832767 -0.0047293994 0.0006364604 -0.0363359390 -0.0015944377 -0.0008028973 -0.0283103120 -0.0007022286 -0.0057878157 -0.0220987227 0.0069695636 0.0027112193 -0.0302307415 0.0278560750 0.0278193357 -0.0375454927 0.0185463072 0.0026981810 -0.0173410296 0.0045784947 0.0145070727 -0.0474151890 0.0166334065 0.0263082569 -0.0510660561 0.0289218395 0.0163613099 -0.0208441484 0.0194240591 -0.0060260233 -0.0037222618 -0.0070443652 0.0218958955 -0.0563118843 0.0169212654 0.0343903102 -0.0661771558 0.0379380314 0.0172036061 -0.0100610413 0.0354461591 0.0376016031 -0.0400918373 -0.0691750355 0.0101932853 -0.0740476692 -0.0266564646 -0.0102189503 -0.0809166780 -0.0350522460 -0.0008667773 0.1208699058 -0.0182523596 0.0004829343 -0.0144085526 0.0041142407 0.0140542360 -0.0025886339 0.0317009539 0.0166122441 -0.0171764811 0.0040631193 0.0216346326 -0.0030851983 -0.0606186035 0.0449560739 0.0139098369 0.0266777220 0.0340500594 -0.0584680275 0.0424454694 -0.0191874597 0.0643284631 0.0038573701 0.0261777599 0.0277818562 0.0358763631 0.0372303001 0.0474154898 -0.1106438307 0.0135888251 -0.0296128275 -0.0080655478 0.0418982496 0.0180811720 -0.0959404409 0.0903058443 0.0651122957 0.0197689202 0.0610796641 -0.0990027681 0.0682394541 0.0030567937 -0.0675396793 0.0032239448 0.0403460460 -0.0382613129 0.0447389078 -0.0243223003 0.0850265059 0.0240411056 -0.0133015217 0.1075485150 0.0870743016 -0.0474690661 0.0489904810 0.0284617821 0.0345023056 0.0432647315 0.0652311527 0.0500915173 0.0321627427 0.0371654827 0.0349617709 0.0824576758 0.0190847745 -0.0073009291 0.0629451730 0.0380601902 -0.0092130596 0.0476292942 0.0283060553 -0.0045716862 0.0154432164 -0.0014415607 0.0013729034 0.0005056410 -0.0220315607 0.0040496957 0.0156326363 -0.0112028547 -0.0000262269 0.0466228243 0.0622093341 -0.0126765843 0.0590083689 0.0439735456 -0.0059473711 0.0025640624 -0.0101530671 0.0011121200 -0.0334408213 -0.0459981974 0.0098375037 0.0022374866 -0.0275867651 0.0041041860 0.0569140394 -0.1011054376 -0.0359908355 0.1181927937 -0.0859278350 -0.0302695761 0.0625468055 -0.0065590290 0.0031434057 0.0156777985 0.0583956347 0.0322251046 0.0237996937 0.0451046588 0.0330712189 0.0754483651 -0.1624710774 -0.0620858584 0.1514466871 -0.1340698011 -0.0493661091 0.0528980703 0.0064642614 0.0032767227 -0.0496031521 0.1193255261 0.0565017854 -0.0117510765 0.1003804144 0.0608613729 0.0777868490 -0.0441501963 0.0160740212 -0.0435172004 0.0165488599 -0.0155941051 -0.0500229180 0.0413479308 -0.0353363000 -0.0628062114 -0.0194065879 0.0410923103 -0.0871487357 0.0159628867 0.0048940960 0.0616138749 -0.0090571052 0.0101913846 0.0258661176 0.0072742962 0.0122215192 0.0372287990 -0.0363398787 0.0260763206 -0.0352922035 0.0304787843 0.0073741059 0.0687032051 -0.0472578110 0.0321913962 -0.0607792142 -0.0532086132 0.0234823038 -0.0441219904 -0.0693113909 0.0318252674 -0.0795272709 -0.0800626351 0.0280646227 -0.0747626831 -0.1080418928 0.0421024563 -0.1410437954 0.0216701255 0.0036371440 0.0245028697 -0.0050018542 0.0058101704 0.0722825455 0.0859491521 0.0012390303 -0.0770075031 0.1282886460 0.0001426401 -0.1531951703 0.1102667806 -0.0014990162 -0.1028823627 0.1843213556 -0.0046091213 -0.2448999126 0.0278847909 0.0063197735 0.0096454970 0.0986558052 0.0035620836 -0.1104151582 0.0038916009 0.0083264936 0.0459341908 0.1311044094 0.0031251357 -0.1706976268 -0.0437304100 -0.0044695151 0.0037884841 -0.0548212163 0.0213759187 0.0238427882 -0.0329062166 -0.0097825572 -0.0070419703 -0.0627319099 -0.0307039803 0.0095763446 -0.0234553932 -0.0019754636 -0.0406846106 -0.0370660057 -0.0012690461 -0.0375448126 -0.0076958414 -0.0017913417 -0.0493734425 -0.0317765018 -0.0038645840 -0.0536323804 0.0030303955 -0.0010420038 0.0002288263 -0.0006385541 0.0118254236 -0.0470080442 0.0019207395 0.0105376431 -0.0201655455 0.0078983430 0.0063990319 0.0539297129 -0.0013585282 -0.0006815779 0.0258100716 0.0190273115 0.0016402307 0.0442335201 0.0099903076 0.0039604349 0.0632728329 0.0468327387 0.0017529435 -0.0058198556 0.0333621637 0.0034496664 0.0178983817 0.0648672334 0.0023638176 -0.0379979133 0.0313415927 -0.0016205591 0.0239086421 -0.0213562417 -0.0083053052 0.0076875713 -0.0009087271 -0.0206822147 -0.0241967777 -0.0429976540 -0.0277486059 -0.0510163103 0.0384532372 -0.0301738361 -0.0513163656 -0.0122882332 -0.0009823062 -0.0457925107 0.0403089702 -0.0999472783 0.0309441589 0.0209739793 -0.0726069555 0.0122377914 -0.0200454068 -0.0103551275 -0.0306270079 0.0071623904 -0.0590237718 -0.0080373583 0.0085876575 -0.0490375393 0.0084913788 -0.0128321518 -0.0175951430 -0.0129901843 -0.0157336937 -0.0265475560 -0.0308168631 0.0144195057 -0.0747370995 -0.0065307232 0.0164351667 -0.0562022447 0.0238396541 -0.0197917755 -0.0024248257 -0.0141586962 -0.0165221959 0.0055045960 -0.0412094506 -0.0110513414 -0.0071907376 -0.0226149407 -0.0114850847 -0.0067236470 -0.0215620515 -0.0026220478 -0.0154909859 -0.0218270252 -0.0001172242 0.0013403060 -0.0271139440 -0.0155162466 0.0090316787 -0.0236653161 0.0117263715 -0.0333333972 -0.0226822424 0.0132902004 -0.0241046185 -0.0253590719 -0.0141171620 0.0176504372 -0.0262370519 -0.0271124416 0.0224173251 -0.0231109633 0.0201367817 -0.0487428718 -0.0219946629 0.0229654356 -0.0351481137 -0.0275735004 -0.0248595563 0.0374189645 -0.0267611809 -0.0003936364 0.0084634221 -0.0288791674 -0.0307392678 -0.0135077491 -0.0477478352 -0.0124621737 -0.0151183512 -0.0531793002 0.0376396609 0.0026194243 0.0077877599 -0.0272291168 0.0126195506 0.0162658340 -0.0157936402 0.0029460340 0.0313116404 -0.0026830835 -0.0047863914 0.0345291938 -0.0515413921 0.0093778301 0.0300662547 0.0591955878 -0.0241228472 0.0054622994 -0.0973674746 0.0378862554 0.1363957612 -0.1616109522 0.0230722126 -0.0962745378 -0.0126303179 -0.0000145570 0.0422998822 -0.0033106577 -0.0087147917 0.0530772798 0.1336622298 0.0109249399 0.0756015226 -0.0044870061 -0.0200395098 -0.0033096483 0.1108457185 -0.0799228514 -0.0754425791 -0.0872525829 -0.0143718642 0.2082830106 -0.1647823371 0.1074682478 0.1575150534 -0.0683363829 0.0301602069 0.0833011087 -0.1899999538 0.0295906832 -0.0938092138 -0.1185676694 0.0110597193 -0.1969040722 -0.2537110059 0.0441996120 -0.0864132403 -0.0306867825 -0.0175091492 0.0477165851 0.0155924551 0.0127652503 0.0444584351 0.0115646902 -0.0293093294 0.0748386247 0.0037788822 -0.0052986651 -0.0030141805 -0.0116843092 0.0241545513 -0.0173807005 -0.0153925300 0.0351440521 -0.0183512437 -0.0037864417 0.0182431394 -0.0071128262 0.0144377967 -0.0163329216 0.0094256745 0.0188349185 -0.0292303429 0.0118230339 -0.0217848935 0.0410264886 -0.0269950364 -0.0263298558 0.0560283860 -0.0274690862 -0.0115491277 0.0425504712 -0.0134523799 0.0241007322 -0.0304455044 0.0188767794 0.0334462879 -0.0541619540 0.0241205128 0.1021061062 0.0944546834 -0.0445758903 0.0926024378 0.0812595774 -0.0429579298 0.0225616147 -0.0210609540 0.0083248106 -0.0390081797 -0.1091952398 0.0550633183 -0.0318046815 -0.0955874773 0.0542877450 0.1580447449 0.1782838032 -0.0800825452 0.1383676767 0.1482265079 -0.0786571274 0.0195868773 -0.0277128971 0.0092517042 -0.0912876919 -0.1865703768 0.0918382261 -0.0819907028 -0.1649626026 0.0948024933 -0.0125013322 0.0338239310 -0.0135194742 -0.0177081063 0.0727352861 -0.0187479457 -0.0217731112 -0.0987580852 0.0258827806 0.0600090031 0.0400855453 -0.0086498058 0.0017133746 0.0227570862 -0.0121202323 0.0089071751 0.0207242469 0.0345177813 -0.0088467321 0.0405646843 -0.0552245081 -0.0126204358 0.0570099662 -0.0509444049 -0.0151565153 0.0413044425 -0.0944722066 -0.0228607947 0.0705875062 -0.0869476300 0.0075739377 0.0387646312 0.0432181004 -0.0032601873 0.0564281924 0.0007430892 0.0126607290 0.0388111596 0.0762390106 -0.0062488607 0.0707112120 0.0051964766 0.0189915461 0.0032409659 0.0474570211 0.0426712227 0.0017579245 0.0031362940 0.0161726465 0.0049383769 0.0539345026 0.0403117464 0.0033652416 0.0112546590 -0.0029154914 0.0073977025 0.0857231616 0.0398687520 0.0053065201 0.0144223139 0.0674512484 -0.0002473735 -0.0409575587 0.0672129672 0.0001332172 -0.0396533244 0.0885731250 -0.0019673535 -0.0784669128 0.0877967597 -0.0013326713 -0.0767202627 -0.0401186163 0.0262668800 0.0158820925 -0.0523930631 0.0435499048 0.0162115080 -0.0241448852 0.0331946751 0.0147388354 -0.0519118488 0.0119770751 0.0166957363 -0.0257920831 0.0085104773 0.0123151992 -0.0272387132 0.0159192701 0.0201411408 -0.0136084681 -0.0023906177 0.0125982505 -0.0345108168 0.0064560813 -0.0011202910 0.0161657062 0.0027066387 -0.0075868472 0.0288836722 -0.0159040629 0.0715134079 0.0220059061 -0.0131397000 0.0283714505 -0.0001856650 -0.0050322440 -0.0816840137 0.0103860170 0.0048688330 -0.0485398249 -0.0063439767 0.0080086783 -0.0342126318 0.0035806704 -0.0059666138 -0.0758517571 -0.0270350805 -0.0105584743 0.0575159327 -0.0176790667 0.0057263031 0.0214456426 -0.0358010660 -0.0132507993 0.1076242309 -0.0162401987 0.0203391418 -0.0273646152 0.0262298707 0.0112797023 -0.0331305202 0.0019659840 0.0181670270 -0.0051255287 0.0097380958 0.0117457799 0.0112511108 -0.0094912712 0.0186132378 0.0065821971 0.0326063102 -0.0086575034 -0.0085733517 -0.0400327105 0.0376258165 -0.0477498074 -0.0209379181 0.0231289343 -0.0378493592 0.0246810905 -0.0059012306 -0.0131068662 0.0320585615 -0.0241395631 -0.0074670774 -0.0492416558 0.0505648719 -0.0532304825 -0.0226203528 0.0319440643 -0.0409404118 0.0551842402 -0.0381234283 0.0030997846 0.0567635713 -0.0467817087 0.0068428728 -0.0906422135 0.0845873285 -0.0737254678 -0.0444432730 0.0471379118 -0.0531868975 0.0337154581 -0.0126703113 -0.0070857953 0.0340032926 -0.0064064887 -0.0077022515 0.0348834252 -0.0061286423 -0.0096602084 0.0135299424 -0.0189814033 -0.0013231730 -0.1108803644 0.0139165467 -0.0074406570 0.0021881178 -0.0467473426 -0.0289590543 -0.0284208658 0.0166469352 0.0256827221 -0.0940171970 0.0344843000 0.0226997255 -0.0604172174 -0.0321194699 -0.0324046202 0.0375242392 -0.0753356445 -0.0500898465 -0.0166029304 0.0359086036 0.0503884621 -0.1305136882 0.0662096657 0.0473417274 -0.0705623998 -0.0530862998 -0.0563409918 -0.1604748290 0.0317716379 -0.0110057213 0.1108476720 -0.0858836951 0.0211493933 0.0641738822 -0.0530185779 0.0237279823 -0.0140430398 0.0140620362 0.0254597128 0.0351223104 -0.0148729051 0.0200808471 0.0546584440 -0.0160322149 0.0388126834 0.0719441819 0.0011659037 0.0129427361 -0.0567278754 0.0360934276 -0.0034004564 -0.0832194790 0.0080751575 -0.0112417014 -0.0600953090 0.1333671475 -0.0036623410 -0.1164614873 -0.0347739790 -0.0234046997 0.0778714464 -0.0433044876 0.0926151163 0.1193218664 -0.0702655060 0.1353362160 -0.0935348726 -0.0062150663 -0.0166588984 -0.0766708951 0.0092055406 -0.0317201301 -0.0915211266 0.0050707349 0.0088282115 -0.0471947299 0.1495066975 -0.0031775092 -0.0380671154 0.1497187921 0.0022943450 -0.0978466099 0.1440532974 -0.0254405183 -0.1821191866 -0.0202798100 -0.0161339226 -0.1073555596 -0.0911450670 -0.0435819822 -0.1034690149 -0.0377289337 -0.0247976507 0.0213125698 -0.1016540674 0.1151977511 0.1952093588 0.0089895084 0.1003069121 0.1726889120 -0.1441660620 0.2225318360 0.0156678859 0.0139453866 -0.0014709233 0.0154733249 0.0087516769 0.0043164512 0.0111949773 0.0220654914 0.0025566233 0.0118494630 0.0365701524 -0.0027550313 0.0121934293 0.0423347217 -0.0082390692 0.0147375661 0.0328583582 -0.0086107197 0.0189093143 -0.0035746798 0.0096116110 0.0065710004 0.0236856527 0.0048358350 0.0092502155 0.0486462923 -0.0051021524 0.0100792636 0.0548459497 -0.0135836313 0.0160269808 0.0388205024 -0.0157294713 -0.0085505260 0.0310635578 0.0128648253 -0.0032238465 0.0374079892 0.0023042422 -0.0089389843 0.0222177478 0.0068965179 -0.0143041613 0.0047501865 0.0196380056 -0.0162235814 0.0056673579 0.0268501897 -0.0098912030 0.0411207326 0.0126835708 0.0031618230 0.0513317236 -0.0069242151 -0.0096593538 0.0189185234 -0.0043792716 -0.0168203667 -0.0082533643 0.0225585173 -0.0206470638 -0.0039515172 0.0339610963 0.0081058762 0.0499509380 -0.0054963414 0.0075310768 0.0588000329 -0.0072028490 -0.0503774731 -0.0656252710 0.0120646574 0.0295247398 0.1007039676 -0.0311969954 0.0203897060 -0.0267065171 0.0149914800 0.0007488854 -0.0220526050 -0.0565210338 0.0423027469 -0.0482657657 0.0805045957 0.0428908227 -0.0657376569 0.0693754866 0.0600327296 -0.0512462435 0.1428799660 0.0625826872 -0.0822777542 0.1238080543 -0.0041769674 -0.0414415502 -0.0776139014 0.0166334347 -0.0625012546 -0.0155870516 -0.0213420869 -0.0397331468 -0.1327035340 0.0149339910 -0.0778904339 -0.0290957395 -0.0003272610 -0.0248440425 -0.0525736217 -0.0226073426 -0.0247490832 0.0273147366 0.0057275780 -0.0459277889 -0.0874800753 -0.0106352650 -0.0630563518 -0.0413477467 0.0217348205 -0.0481386623 -0.1416513883 -0.0067970363 -0.0796685343 -0.0685334145 -0.0411837125 -0.0418802029 0.0786797434 -0.0359585780 -0.0598743630 0.0458560418 -0.0598851003 -0.0405322197 0.1457778640 -0.0514301977 -0.0721646731 0.0865976002 0.0111347041 -0.0080663022 0.0294686401 0.0102016349 -0.0001375904 0.0422185283 0.0076236090 -0.0027415718 0.0368003709 -0.0030391365 -0.0142204066 0.0179378477 0.0247715166 -0.0061839597 -0.0047138023 0.0072409587 -0.0104033452 -0.0052473444 0.0343680925 0.0003326572 -0.0133750672 0.0241874943 -0.0045789484 -0.0102007613 -0.0569136116 -0.0090587983 -0.1269641135 -0.0652435917 0.0030779363 -0.1797968479 -0.0571516467 0.0001654218 -0.1412776055 -0.0205364827 -0.0048311544 -0.0263850038 -0.0345718275 -0.0157175704 -0.0649045433 -0.0258412585 0.0088540059 0.0472811058 -0.0206371112 -0.0033022649 0.0195266368 -0.0375368264 0.0027228524 0.0776684384 -0.0428523280 0.0075864309 0.0850913182 -0.0377498915 0.0015424126 0.0947521605 -0.0210975658 0.0211076112 0.0284496781 -0.0235478155 -0.0308804549 -0.0227863147 -0.0221142460 0.0230179829 0.0232099961 0.0152660871 0.0132065317 0.0714910989 -0.0528414703 0.0710788000 -0.0040426467 0.0088307636 -0.0138692112 -0.0042031384 -0.0077536513 0.0495214925 -0.0515692856 0.0011525519 0.0306945605 -0.0387017188 0.0165323729 -0.0121952115 -0.0091275632 -0.0084399812 0.0381117685 -0.0319091297 0.0237108201 -0.0023738104 -0.0292424191 0.0312449786 -0.0231397667 -0.0142607401 0.0013345026 0.0145160897 -0.0154343519 -0.0242770874 0.0616314920 -0.0384285330 0.0346129777 -0.0106523501 -0.0349814843 0.0464429927 -0.0447528405 -0.0074501569 0.0141381871 -0.0262305928 -0.0007804562 0.0120580323 -0.0134221383 -0.0076700247 0.0110332513 -0.0169538421 -0.0004540351 0.0177337991 0.0018791024 -0.0118843155 0.0018137350 0.1317363573 -0.0454003861 0.0103024395 0.0449575291 0.0017483239 0.0230184372 0.0102916120 -0.0390299969 0.0181905868 0.0755000903 -0.0569546979 0.0012169821 0.1135493695 -0.0150838909 0.0048811628 0.0369061121 0.0265527754 0.0265085327 -0.0259437855 -0.0543199312 0.0225895363 0.0854516137 -0.0848885793 -0.0095228861 0.1553854844 -0.0024196034 -0.0100147056 0.1871501809 -0.0590683197 -0.0037554718 0.0193753247 -0.0065028823 -0.0196383872 0.0287985000 -0.0057813983 -0.0472395563 -0.0000474150 0.0781254554 0.0418161239 -0.0182988300 0.0008646173 0.0422422954 0.0072918870 -0.0094270893 0.0655979939 -0.0093127166 -0.0037341378 0.0277014764 -0.0010301582 0.0253037093 0.0534228376 -0.0124695748 0.0189665391 0.0071434264 0.0307608609 0.0673841389 -0.0138174325 -0.0260918208 -0.0037665454 0.0215084187 0.0484615200 -0.0297551450 0.0148878522 0.0819023632 -0.0480781918 0.0807164704 0.0041255026 0.0423691853 0.0159475289 -0.0101383681 0.0092423315 0.0736464289 -0.0478000634 -0.0051013051 0.0202230346 0.0141764848 0.1056140071 -0.0192551284 0.0703925537 0.0794706734 0.0026988016 0.0321477595 0.0362970199 -0.0155897293 -0.0342329491 0.0352377639 0.0021391244 -0.0057849758 -0.0409621135 -0.0520721738 -0.0519838148 -0.0198811309 0.0413088665 0.0866489898 -0.0689870673 -0.0016448533 0.0829807035 -0.0385802092 -0.0004118781 0.1029472724 -0.0526735405 -0.0486021420 -0.0156199442 -0.1049124547 -0.0714610429 -0.0376087958 -0.0628788885 -0.0501293200 -0.0575725536 0.0008053728 -0.0078767269 -0.0498747413 0.0166708210 0.0157011696 -0.0235683779 -0.0278934183 -0.0062538386 -0.0120618210 -0.0859330769 -0.1086207509 -0.0470835929 -0.0758099768 -0.0663453539 -0.0797452123 0.0360266851 0.0143943816 -0.0684477868 0.0913674849 0.0522567293 -0.0181627792 -0.0125505228 0.0119857625 -0.0010621681 -0.1134887796 -0.0521288096 0.0331344243 0.0440025475 -0.0499821610 0.0271639609 0.0096202799 -0.0451578868 -0.0159279605 0.0126679765 -0.0428622215 -0.0546511512 0.0486951805 -0.0441956083 -0.0422223494 0.0802925776 -0.0570723412 0.0697416989 0.0432656631 -0.0505552204 0.0578721430 -0.0188405000 -0.0353669567 -0.0152401345 -0.0322500380 -0.0365387282 -0.0895944327 0.0491095624 -0.0409412504 -0.0671733345 0.1061884834 0.0624174703 -0.0116883642 0.1027133267 -0.0141062567 -0.1407132201 0.1399543159 -0.0284951224 -0.0710065856 -0.0345147955 -0.0350517060 0.0414165213 -0.0661163285 -0.0226768398 0.0023228380 -0.0644559855 -0.0046498924 -0.0006983077 -0.0143421675 0.0172454363 -0.0007990860 -0.0004018459 0.0840040196 -0.0102921645 0.1193912671 0.0023000958 0.0020871265 -0.0338242797 0.1233970335 -0.0144931207 0.1838214393 0.0485376257 -0.0082139011 0.0743667113 0.0980920808 -0.0125904644 0.1525754423 0.0609084878 -0.0108537383 0.0904596878 0.1478519272 -0.0164412303 0.2379924269 -0.0120582561 -0.0062886504 0.0095556409 -0.0154900861 -0.0052492699 0.0230609866 0.0151580819 -0.0080427747 -0.0343004216 0.0547803659 -0.0136246084 -0.1020440830 0.0102094736 -0.0067245252 -0.0200321445 0.0806191466 -0.0175944991 -0.1466340199 0.0203135265 -0.0104386080 -0.0394304486 0.0609825186 -0.0146530701 -0.1122010535 0.0202338082 -0.0104589959 -0.0369405220 0.0942506142 -0.0185333503 -0.1707450818 0.0337628729 -0.0024111966 -0.0046204461 0.0286606816 0.0024963436 -0.0087026273 0.0399301513 0.0063802617 0.0012380265 0.0278132484 -0.0049806656 -0.0093867348 0.0425045113 -0.0189357422 -0.0009546895 0.0349446285 -0.0131204853 0.0060133417 0.0469865987 -0.0229001708 -0.0010884850 0.0378979895 -0.0158258523 -0.0115037005 -0.0068957218 -0.0127714336 -0.0097407287 -0.0511055857 0.0032614198 -0.1153982658 -0.0286165107 -0.0033701058 -0.0606942768 0.0285806127 -0.0188168689 0.0680365258 0.0157280132 -0.0194039850 0.0391807975 0.0156537989 -0.0399486690 0.0051098347 0.0169263618 -0.0146398278 0.0489035793 0.0075963861 -0.0046125195 -0.0825571715 0.0079751122 -0.0378241649 -0.0480724020 -0.0027810944 -0.0005754065 -0.1272462039 0.0232876770 -0.0580526976 0.0089169322 0.0105733391 -0.0178425475 0.0313712282 0.0136152476 -0.0449666341 0.0055662008 -0.0056898528 -0.0342057036 -0.0272580440 0.0322612281 -0.0650501527 0.0114755082 0.0174474339 -0.0087816506 -0.0152274233 -0.0282107569 0.0123514636 -0.0300665704 -0.0159832262 0.0057908350 -0.0255884024 0.0106318848 -0.0063392273 -0.0160203468 0.0054161938 -0.0124861922 -0.0173212535 -0.0201380865 0.0138151502 -0.0266546472 -0.0054039678 0.0061211049 -0.0213608503 0.0196321058 -0.0199204800 -0.0121634610 0.0113836398 -0.0210682725 -0.0148223822 -0.0344858948 0.0254494851 -0.0313583933 -0.0090416215 0.0101079174 -0.0224608805 0.0150355769 -0.0030986879 -0.0182121492 0.0139064965 0.0012216117 -0.0205638911 0.0170461155 -0.0070955043 -0.0145006276 0.0047393480 0.0051571402 -0.0206701823 -0.0829215783 0.0958641619 -0.0437523807 0.0103373124 -0.0143196190 -0.0246994655 -0.0332008753 0.0538373270 -0.0256508237 -0.0782859417 0.0993353700 -0.0366374765 -0.0346688500 0.0323538142 -0.0361910037 0.0432613051 -0.0547775167 -0.0205030372 -0.0335380234 0.0648747669 -0.0202387245 -0.1101775612 0.1404137876 -0.0389969459 -0.0337185711 0.0239530407 -0.0399345728 -0.1205859518 0.1387443862 -0.0537949912 0.0420779085 -0.0383908533 -0.0024032596 0.0386780813 -0.0462371809 0.0014569519 -0.0072302381 -0.0537114220 -0.0339708696 0.0025332044 -0.0147312305 -0.0022842959 0.0203766166 0.0057459887 0.0051823211 0.0404776622 0.0285933771 -0.0294613388 -0.0476412475 0.0484800652 0.0059301417 -0.0772307036 0.0827521315 0.0243272107 -0.0402020443 0.0908599717 -0.0149638197 -0.0676529935 -0.0436135213 0.0422105680 0.0339015505 -0.0018178268 0.0553099421 0.0760896402 -0.0057449699 0.0892550262 -0.1260609850 0.0317366997 -0.0093579606 0.0044577848 0.0779175576 0.0340889433 -0.1135208769 0.1561027991 0.0617994229 -0.0365160021 0.1256933981 -0.0492450731 -0.0092982211 0.0593448042 -0.0247799205 -0.0729075876 0.0996836344 0.0061480975 -0.1041722838 -0.0457031440 0.0918196302 -0.0696350868 -0.0582791801 0.0474299352 -0.0426170998 -0.0902116523 0.0155997534 0.0126446471 -0.0271573557 0.0685962551 0.1385202828 0.0546351082 0.0601484672 0.1093090619 -0.0520030063 0.1651217678 -0.0069854615 -0.0132475617 -0.0088970566 -0.0159960713 -0.0062291067 -0.0079182309 -0.0105297612 -0.0136724862 0.0040062269 0.0005808964 -0.0249940731 0.0132556525 0.0063718652 -0.0249217034 0.0085668900 0.0028517489 -0.0223829188 -0.0009666087 -0.0282811748 0.0040223018 -0.0162916553 -0.0157240931 -0.0109815200 0.0061526826 0.0091946750 -0.0426306135 0.0308570043 0.0162940961 -0.0321332596 0.0158549408 0.0081452074 -0.0272931777 -0.0007971320 -0.0353206677 -0.1256434793 0.0187265309 -0.0248618907 -0.1049520382 0.0395066455 0.0114105627 -0.0147692216 0.0080920608 0.0280452992 0.0418306515 -0.0343264774 0.0190602250 0.0172994181 -0.0541763699 -0.0571644894 -0.1948866452 0.0357991944 -0.0398225811 -0.1512094803 0.0733245724 0.0353642701 0.0318872308 0.0198329421 0.0505823600 0.1090022031 -0.0538158680 0.0377504017 0.0648126385 -0.0902242368 0.0172671207 -0.0238775262 0.0326413283 0.0083030503 -0.0774634102 0.0434530433 0.0469236575 0.0866272698 0.0149078238 0.0438867594 0.0176346356 0.0334924129 -0.0199020054 -0.0026035290 -0.0406766396 0.0237819727 -0.0120024506 0.0489810342 -0.0572102840 0.0082328243 -0.1127797059 -0.0410733541 0.0088686745 -0.0817100500 -0.0992644335 0.0165689427 -0.1934195262 -0.0715162992 0.0177320458 -0.1401027993 0.0487758663 -0.0106714217 0.0940084588 0.0175463622 -0.0004143002 0.0324639014 0.0913376003 -0.0169908856 0.1673517814 0.0358330179 0.0028755158 0.0670234876 0.0081084564 0.0221892265 0.0337159603 0.0095512252 0.0244175045 -0.0443371766 0.0022504211 0.0605648576 0.0898957221 -0.0065233481 0.0968558214 0.0719311358 0.0039236723 0.0606118454 0.1414130608 -0.0127119360 0.1260794761 0.1189228863 0.0050637649 0.0615202004 -0.0716250060 -0.0032686726 0.0963252070 -0.0116583283 0.0050338727 0.0618977032 -0.1381045421 -0.0075779394 0.1231155353 -0.0293528857 -0.0239214013 -0.0220256450 0.0167257736 -0.0239983045 -0.0099537086 0.0399315887 -0.0296558818 -0.0273418105 0.0144361266 -0.0390812522 -0.0354448777 0.0125242771 -0.0106903853 -0.0039094620 -0.0351977761 -0.0331226744 -0.0118164958 -0.0388073724 -0.0029239607 0.0103306260 -0.0472789233 -0.0078603714 -0.0010771283 -0.0379045561 0.0369828757 -0.0222070580 0.0664666338 0.1108411817 -0.0211294610 0.1493309177 0.0706791432 -0.0106092812 0.1003583309 -0.0419175985 0.0092192468 -0.0162986758 -0.0191429516 -0.0066859223 0.0130815370 -0.0269605770 0.0161595307 -0.0202091357 -0.0428130865 0.0028399347 -0.0201707179 0.0481208230 -0.0113478319 -0.0674779895 0.0271958867 0.0153644326 -0.0534613581 0.0828085854 -0.0128665209 -0.0898818946 -0.0472746633 0.0305970025 0.0076462249 -0.0303951276 -0.0151652983 0.0064339679 -0.0283294498 0.0062822057 0.0197386163 -0.0189910041 -0.0008107006 0.0392424751 -0.0343895439 0.0138550591 0.0157833651 -0.0232597680 -0.0389562233 -0.0116613264 0.0132522109 0.0208865417 -0.0600767927 0.0075062758 0.0068078661 -0.0504031613 -0.0112544028 -0.0263975527 -0.0263765892 0.0083170974 0.0041371680 -0.0272909534 0.0008535251 -0.0101717103 -0.0604246712 -0.0077881753 -0.0275012689 -0.0471089916 -0.0002161761 -0.0136017803 -0.0142459421 0.0153653765 0.0154387598 -0.0178727266 0.0026253072 -0.0105154371 -0.0782049487 -0.0128658971 -0.0403230668 -0.0539893601 -0.0203615862 -0.0358762720 -0.0204874241 -0.0209780654 -0.0189235941 -0.0255724160 -0.0252194472 -0.0160857559 -0.0201917801 -0.0027617216 -0.0127770679 -0.0279486240 0.0305058732 0.0888423477 -0.0562150227 -0.0013972310 0.0296629132 -0.0047611224 0.0151908994 -0.0144807379 -0.0640470820 0.0353321643 0.0365715617 -0.0789021933 0.0146236375 0.0845561710 -0.0182706305 -0.0168172014 0.0299834233 0.0256060561 0.0094897404 -0.0467159130 -0.0880502122 0.0498838556 0.0380525945 -0.1143711752 0.0118668913 0.1255869925 0.0030770097 0.0382258945 0.1319837955 -0.0671032453 0.0048478317 -0.0175442673 0.0099945650 -0.0149147085 -0.0138053253 0.0150255659 0.0422984842 0.0364996034 -0.0521795294 0.0075019049 -0.0043819497 0.0155293872 0.0142180808 0.0412719181 0.0026440972 0.0521266058 0.0272822050 -0.0004842319 -0.0294518257 0.0496514951 0.0165106634 -0.0479991450 0.0235285280 0.0085833066 -0.0407599075 0.0860718769 0.0376138911 -0.0665378386 0.0173419692 -0.0016415537 -0.0171717361 0.1071447734 -0.0142589757 -0.0112053883 0.1612364915 -0.0310647904 -0.0576026033 0.0076780602 0.0045885199 -0.0469292437 0.0243619429 -0.0163591805 -0.0545483464 0.0124044230 0.0288347883 -0.0371020708 0.0765419256 0.0531068891 -0.0526760465 0.0999272896 0.0419575577 -0.0440686034 0.0863414833 0.0243315010 -0.0676041626 0.0099015066 0.0340099653 -0.0536398199 0.0377421510 -0.0315799887 -0.0974219526 -0.0064801099 -0.0164470317 0.0387921345 0.1726831034 -0.0524180120 -0.0269959207 0.1508742845 -0.0229735724 -0.0417047465 0.2029744660 -0.0321899400 0.0464578432 -0.0465182426 0.0676922430 0.0551918119 -0.0325361480 0.0466149022 0.0528190499 -0.0394160066 0.0289638040 0.0465401658 -0.0654968870 0.0360341736 0.0384524318 -0.0798514064 0.0566501177 0.0400327213 -0.0687628710 0.0715792381 0.0651508040 -0.0120750844 0.0442981065 0.0544525536 -0.0222104515 0.0111899952 0.0463199657 -0.0848398239 0.0210688233 0.0310729081 -0.1002984392 0.0602478751 0.0349391628 -0.0761600875 0.0840257042 0.0343116218 0.0098398625 -0.0316707316 0.0184733230 -0.0072047759 -0.0091384175 0.0136539060 0.0040646151 -0.0081291820 0.0316904338 0.0444859347 -0.0352389802 0.0474668078 0.0604759970 -0.0572955702 0.0359184091 -0.0065393033 -0.0309833400 0.0069198669 -0.0353335766 0.0101163534 -0.0186805684 -0.0391710602 0.0273121600 0.0277877429 0.0558573636 -0.0342929602 0.0581548583 0.0845013338 -0.0749320795 0.0251806154 -0.0615775179 0.0146002240 0.0713373210 -0.1290614885 0.0161130268 -0.0493966252 -0.0522445753 0.0394783282 -0.0152170223 -0.0623011504 0.0433319697 0.0419512771 0.0160033148 0.0551145978 -0.0261533540 0.0294855929 -0.0158261099 0.0751004645 0.0383404196 0.0699063878 0.0259968651 0.0769131295 0.0032215882 0.1380810124 0.0246728006 0.1286177217 0.0481463388 0.0932151710 0.0105324882 -0.0761392173 0.0693910896 -0.0785453727 -0.0530323868 0.0915008346 -0.0776238759 -0.1376024720 0.0807583716 -0.1271031791 -0.0950835470 0.1174424383 -0.1342892961 -0.0342400930 -0.0287447895 -0.0144831026 0.0151428400 -0.0351663332 -0.0355872494 -0.0834457304 -0.0620005403 0.0198869238 -0.0827299535 -0.0966947285 0.0501843786 -0.1260169757 -0.0570937426 0.0266817077 -0.1231942649 -0.1174706807 0.0852887561 0.0225042586 -0.0725362255 -0.0139026476 -0.0296846365 -0.1028429508 0.0322639824 0.0682728062 -0.0766682020 -0.0276588074 -0.0279942442 -0.1293720376 0.0546884041 -0.0162467340 0.0231099351 0.0117467815 -0.0340048529 0.0470573667 0.0107964479 0.0050208217 0.0368900864 0.0149133972 -0.0357201451 0.0033809292 0.0089832506 0.0133131426 -0.0148754724 0.0091867608 0.0111691142 -0.0097662809 0.0140867391 0.0195969528 -0.0191657948 0.0081334257 0.0057268532 -0.0173906040 0.0012981704 -0.0169829493 -0.0446360077 -0.0363579799 0.0304711367 -0.0184108514 -0.0732655832 0.0052503692 -0.0131840781 -0.0531273558 -0.0529194359 -0.0042152567 0.0091710382 -0.0456062326 -0.0362891802 -0.0110456106 -0.0484553211 0.0050629268 0.0266980332 -0.0649005822 -0.0061198303 0.0361652041 0.0226469021 -0.0116192454 -0.0529273207 -0.0067132817 0.0049092129 -0.0101258130 0.0587069971 -0.0119707506 -0.0941330462 -0.0549997430 0.0195187434 0.0301856129 -0.0548317655 -0.0537975858 0.0019728334 -0.0430461183 -0.0274849492 0.0152501873 -0.0547642450 -0.0510663292 0.0393194199 -0.0196929053 -0.0190070761 -0.0158199283 0.0183129533 -0.0376634064 0.0133551051 0.0405409685 -0.0146042457 0.0010321727 0.0308612985 -0.0133306521 0.0002098487 0.0107957530 -0.0155094668 0.0028802474 -0.0065291606 0.0189994426 -0.0136333820 0.0534242327 -0.0403450185 0.0108483387 0.0404211847 -0.0385207498 0.0105162220 -0.0178886463 0.0181462791 -0.0132565036 -0.0278530310 0.0442562538 -0.0243100743 0.0787408816 -0.0609094132 0.0181477440 0.0533692331 -0.0508795315 0.0166581873 0.0140264814 -0.0295389022 0.0141161322 0.0193236440 -0.0088997144 0.0108181241 0.0072712422 0.0139502551 0.0016567978 0.0197078798 -0.0132908839 0.0150138415 0.0173299953 0.0063536201 0.0129748015 0.0173977359 -0.0031427464 0.0173813921 0.0183853592 -0.0118540738 0.0136796985 0.0190528259 -0.0017983189 0.0108904103 0.0165445896 0.0062948599 0.0151855799 0.0166904127 -0.0043578869 0.0219877724 0.0148414825 -0.0091546719 0.0133256900 0.0201389657 0.0002882803 0.0046601826 0.0139363619 0.0121255877 0.0156215871 0.0154174687 0.0132077859 0.0113187064 -0.0578882681 0.0522446981 -0.0265920100 -0.0368726661 0.0352881845 -0.0274055458 0.0045839031 0.0220699285 -0.0120889471 0.0772645372 0.0188708415 0.0229403572 0.0591727949 -0.0200181336 0.0271729339 0.0198844434 -0.0032328672 0.0269736510 0.0100965514 0.0047722288 -0.0327640015 -0.0670719507 -0.0268429885 -0.0399104652 0.0331919219 0.0438519144 -0.0906600812 0.0443718348 0.0084431346 0.0007705016 0.0908118680 -0.0832811682 0.0386810136 0.0814895957 -0.1336119031 0.0519770579 -0.0918354540 -0.0267359480 -0.0681205443 -0.0735958192 -0.0252356906 -0.0573905256 -0.0836474446 -0.0425697931 0.0055575007 0.0286991142 0.0505493463 -0.1034043657 0.0712853748 0.0519203966 -0.0868520060 0.0107664605 0.0496334167 -0.1096509707 0.0112450499 0.0309954550 -0.0646406828 0.0208295849 -0.0593862583 0.0567058106 0.1211655219 0.0528417206 0.0288247543 0.0018753016 -0.1570192206 0.0488249818 0.1080402845 -0.0861659713 0.0414512913 0.1293571979 -0.1992017735 0.0753622233 -0.0047973153 -0.0674700219 -0.0188382282 -0.0241864641 -0.0695031632 0.0006293423 -0.0344292576 -0.0306080027 0.0121229657 -0.0235601716 0.0079962759 0.0029231089 0.0075502800 -0.0152015097 -0.0023642854 0.0168807007 -0.0573944863 -0.0117234105 -0.0383213192 -0.0921423853 0.0016598468 -0.0520272438 -0.0229130945 0.0210721561 -0.0498032276 0.1020994398 -0.0075571096 0.0200065889 0.0111625483 -0.0056182232 0.0366597507 -0.0678353986 -0.0188376020 -0.0190670415 -0.0133414427 0.0087062283 -0.0198595446 -0.0126248981 0.0111133236 0.0047458282 0.0247068114 -0.0071067817 0.0346649225 0.0678038670 -0.0301794795 0.0342889834 0.0652527124 -0.0321375149 -0.0377245680 -0.0445151785 0.0209886761 -0.0401550258 -0.0434661174 0.0280696170 -0.0103414178 0.0046390723 0.0023847416 0.0536606186 0.0972757991 -0.0436798586 0.0553700854 0.0945628872 -0.0495083915 -0.0541906930 0.1151744911 -0.0097103350 -0.0703067945 0.1751597513 -0.0158129713 -0.0017204234 0.0253725589 -0.0010270714 -0.0313464108 -0.0348605480 0.0139911619 0.0061493146 0.0240666871 -0.0275208654 -0.0246331532 0.0302895125 0.0035220967 0.0516001768 0.0587235665 -0.0135406367 0.0646358045 0.0987290170 0.0381435167 0.0814238232 0.0512516045 -0.0390009517 0.1019687667 0.1224971441 0.0563204787 -0.0184978596 0.0745720746 0.0428307525 0.0291042018 0.1067851151 0.0636120333 -0.0486918347 0.0811739427 0.0586824161 0.0374217104 0.1380366509 0.0996975892 -0.0538628160 -0.0230875705 0.0259844536 0.0050182057 -0.0285833032 -0.0411813169 -0.0901688872 -0.0397188089 0.0610290202 -0.0521689327 -0.0633702383 0.0119696299 -0.1469080647 -0.0323111152 0.1198351945 -0.0782806444 -0.0728591045 0.0396152221 0.0496324849 -0.0544739073 -0.1008418260 0.0229913238 -0.0724359854 -0.0804864110 0.1069079592 -0.0594153878 -0.1626641557 0.0585982391 -0.0909354210 -0.1292698366 0.1102737879 0.0436569365 -0.0104488476 0.0848791322 0.0570360574 -0.0529004323 0.1571051240 0.0617269579 -0.0161108318 0.1181775382 0.0366178943 0.0094200994 0.0826255762 0.0275628137 0.0639176476 0.1022053089 0.0335271813 0.0658837108 0.0627588190 0.0181981103 0.0792668686 0.0879720886 0.0302734862 0.0705192177 0.0048819367 -0.0097794436 -0.0077492575 0.0131028951 -0.0041818595 -0.0213917641 0.0073825633 -0.0030545233 -0.0165598369 0.0021745007 -0.0036581697 0.0016721785 0.0033369480 -0.0084057836 -0.0017275983 -0.0026965950 -0.0058726855 0.0002552169 -0.0024713943 -0.0036994259 0.0028596782 0.0115271406 -0.0025491440 -0.0334288492 0.0055416626 -0.0059670874 -0.0170464723 0.0159050756 -0.0019167432 -0.0481579957 -0.0105265328 -0.0031432058 0.0146184362 0.0083334791 -0.0103899352 0.0080678261 -0.0028438653 0.0043762368 0.0294237011 0.0198063547 0.0027461964 0.0524603285 -0.0236035385 0.0216919971 0.0279736520 -0.0097326851 0.0131055271 0.0280294739 -0.0695873110 0.0534102152 -0.0032094176 -0.0449040894 0.0347631177 0.0095579413 0.0042420493 -0.0032716266 0.0312868577 -0.0561931254 0.0458978149 -0.0025675509 0.0017836167 -0.0034367902 0.0371717052 0.0246953483 -0.0198844806 0.0480926840 -0.0263308030 0.0216732491 0.0132112310 -0.0889353270 0.0703835770 -0.0232760568 0.0173652095 -0.0163644140 0.0467076651 0.0550847734 -0.0384836658 0.0658164015 -0.0032481066 0.0006629730 0.0256698316 -0.0171783122 0.0182786623 -0.0075201355 -0.0088803881 0.0038094796 -0.0066518441 -0.0216801581 0.0140988752 -0.0054766205 0.0904012283 -0.1634660236 0.0379477313 0.0039426508 -0.0267679408 0.0005737231 -0.0101101124 -0.0033523256 0.0027057597 0.0472761377 -0.0943442816 0.0249879648 0.0617554964 -0.1182756779 0.0237215597 -0.0084697193 -0.0076529305 -0.0085904855 -0.0356444463 0.0361692579 -0.0036480611 0.0633326498 -0.1196059202 0.0347587806 0.0936374217 -0.1680851892 0.0300592858 0.1446081008 -0.2480272139 0.0581810927 -0.0343815292 0.0295196493 0.0139777211 -0.0239459045 0.0171388977 0.0152481696 -0.0001929961 -0.0117440886 -0.0093758818 -0.0059395615 -0.0391869624 -0.0782710194 0.0349539770 0.0087396610 -0.0729428011 0.1164276550 -0.0142454472 -0.0848370714 -0.0051380979 0.0062239023 0.0037526117 0.0109271931 0.0467728900 0.0222549830 -0.0290898496 0.0335800772 0.0539095335 -0.0786684743 -0.1164364829 0.0023040378 0.0072040924 0.0782585451 -0.0469924581 0.0747053209 0.1060092242 -0.0080899283 0.0013255912 0.0282981518 0.0185580487 0.0385233035 0.0442367872 0.0316407408 0.0034847657 0.0756178710 0.0216310042 0.0009549099 0.1164205475 0.0049178482 -0.0316953849 -0.0817722420 0.0163230849 -0.0747395336 0.0467109942 0.1702622365 -0.1001842835 -0.1402157855 0.1332408424 -0.0528190845 -0.0722695715 -0.0582447461 -0.1317592135 -0.2196556137 -0.0595361265 0.0834578857 0.1084454870 -0.0067454880 0.1242326738 0.1087911497 -0.0357526218 0.0620902203 0.1223636015 0.0495099376 0.0065769182 -0.0087496126 -0.0009547697 0.0259483017 -0.0707519472 0.0417654326 0.0192064456 -0.0505567910 0.0412165251 -0.0100235863 0.0355147558 -0.0023906156 -0.0275796756 0.0924627859 -0.0405762789 -0.0194300792 0.0653386974 -0.0369289490 0.0436779091 -0.1341845023 0.0693547667 0.0329472644 -0.0933974821 0.0683794053 -0.0205875685 0.0714991510 -0.0090038355 -0.0502669538 0.1595529809 -0.0751137413 -0.0362304973 0.1074937662 -0.0653384032 -0.0075801087 -0.0308734427 0.0042344598 -0.0105895384 -0.0331834452 0.0127514162 -0.0078937433 -0.0204930809 0.0096943268 -0.0062320435 -0.0094616455 0.0005013080 -0.0006416352 -0.0043097369 -0.0096552706 -0.0086360680 -0.0431710086 0.0058156517 -0.0143235442 -0.0432109497 0.0195908810 -0.0018073771 -0.0092011659 0.0115713558 -0.0067363048 -0.0009455319 -0.0000038036 0.0044217581 0.0072333403 -0.0180595606 -0.0701564903 0.2381517350 -0.0292049475 0.0172481585 -0.0651342396 0.0059961136 -0.0363769395 -0.0594329282 0.0253510439 0.0387814463 0.0523595037 -0.0026296099 0.0067866584 0.0032049741 -0.0144251268 0.0064799745 0.0032247528 -0.0012305095 0.0095871782 0.0103965875 -0.0218185825 0.0127518260 0.0172254276 -0.0114257498 0.0101978878 0.0099857894 -0.0349543653 0.0145819714 0.0221164809 -0.0162939123 0.0106623105 0.0108466253 0.0110634840 0.0144964850 0.0173649677 0.0066502752 0.0109097300 0.0112426753 0.0233969642 0.0181423201 0.0226812100 0.0167248704 -0.0033823696 -0.0005502254 0.0012217793 0.0064981892 -0.0010966191 -0.0209072253 -0.0168371275 0.0024403198 0.0254566197 -0.0208820753 0.0043345235 0.0309858230 -0.0258116002 0.0035358513 0.0404939441 -0.0330304376 0.0073970049 0.0534784014 0.0063420491 0.0002273822 -0.0220463517 -0.0082131621 0.0027683300 0.0054075570 0.0158594953 -0.0005359256 -0.0414886656 -0.0100422769 0.0040203710 0.0076420384 -0.0477119862 -0.0747617139 -0.0320176944 -0.0502942101 -0.0447827758 0.0188108015 -0.0556029678 -0.0991078678 -0.0523968589 -0.0739435629 -0.1103975100 -0.0238052598 -0.0114208074 -0.0526714641 -0.1284287426 -0.0378335564 -0.0547397610 -0.1260225227 0.0126186843 -0.0462977873 -0.1442347632 -0.0247869149 -0.0567752564 -0.1430436710 -0.0176133416 0.0134751544 -0.0108248133 -0.0499783513 0.0118825028 -0.0390976055 -0.0332631790 0.0076586712 -0.0250909686 0.0072252595 -0.0002603771 0.0026768298 0.0005577779 0.0088925479 -0.0001940130 0.0074262529 -0.0013826996 -0.0159897895 0.0090574629 0.0028397181 -0.0077711689 -0.0084326739 0.0082149334 -0.0128083230 -0.0025911137 -0.0012073989 -0.0131212536 -0.0202309241 0.0089713827 -0.0087040479 0.0097407965 -0.0036268523 -0.0195025102 0.0061075808 0.0170752271 -0.0029281220 0.0086392180 0.0009454489 -0.0192364062 -0.0060619644 0.0049372299 -0.0384683801 0.0201821833 -0.0215642935 -0.0027899251 0.0116811758 -0.0448884603 0.0253873847 0.0450627618 0.0212397352 -0.0233386974 0.0355920671 0.0084162196 -0.0145374492 0.0145331549 -0.0259863293 0.0145868079 0.0128912787 0.0249577077 -0.0013414077 0.0431959278 -0.0211428568 -0.0165509511 0.0308061401 -0.0373015272 -0.0045974071 0.0016689274 0.0083272314 0.0112173829 0.0047262346 0.0531630480 0.0001730353 0.0564929894 -0.0310139021 -0.0282548259 0.0322402211 -0.0568650206 -0.0094713620 0.0130044437 -0.0518336932 0.0352457173 0.0152715589 -0.0529002324 0.0448530826 0.0157889795 -0.0572196207 0.0518737191 0.0213516022 -0.0431882797 0.0429181604 0.0383756616 -0.0211843019 0.0403759797 -0.0274394237 0.0424816814 0.0342159486 0.0710530867 -0.1071593172 0.0503116700 0.0815233819 -0.0980322819 0.0483393921 -0.0196622707 0.0540323875 0.0313726492 -0.0720190819 0.0965710303 0.0301594282 0.0999338016 -0.1558479375 0.0552008359 0.1209495769 -0.1487920620 0.0513043782 -0.0614364746 0.1217949075 0.0240163526 0.0448945595 -0.0158966517 0.0389568633 -0.0216276127 0.0269627159 0.0133359988 -0.0045074197 0.0125866379 0.0143994656 -0.0068111314 -0.0005709024 0.0001689800 0.0250979015 -0.0620232263 0.0540690597 0.0190251263 -0.0148955288 0.0243893976 0.0447656473 -0.0201295930 0.0214310091 -0.0269351117 0.0015434485 -0.0341914747 -0.0836174856 -0.0490747835 -0.0491732832 -0.0159666889 0.0675929641 -0.0676833795 -0.0253400218 0.0095355285 -0.0364159479 -0.0192276412 0.0571483359 -0.0097598348 -0.0596003162 0.1670082312 -0.0846614186 -0.1032707282 -0.0595948826 -0.0662832306 -0.0879289783 -0.0464103068 -0.0813919674 -0.0989319158 -0.0624424349 -0.0083496285 -0.0105312225 0.0930812386 -0.0882114700 0.0194210139 0.0560219115 -0.0699238276 -0.0513942463 0.0777763569 -0.0603629605 -0.0267621720 0.0144409984 -0.0562884277 -0.0285187706 0.0023878212 -0.0284310745 -0.0177000694 0.0272547015 -0.0258673240 0.0137371285 0.1776816749 -0.1637828267 -0.1255012998 0.1876921646 -0.0447638363 -0.1004528774 0.2230373668 -0.1036116126 -0.0160658744 0.0090153718 -0.0095709222 -0.0206206219 0.0274492059 -0.0239840128 -0.0161461003 0.0153867561 -0.0234515807 -0.0070869163 -0.0187820611 -0.0076517432 0.0031101883 -0.0511443515 0.0132208347 -0.0025471245 -0.0324552722 0.0099605236 -0.0293146111 0.0552891839 -0.0363982502 -0.0192906470 0.0325139414 -0.0361091377 -0.0157089357 -0.0002961205 -0.0244220252 0.0121759196 -0.0808712541 0.0280959440 0.0031965945 -0.0498023678 0.0228822867 -0.0429425827 -0.0649629375 0.0422499387 -0.0301634738 -0.0439266470 0.0470672405 0.0060872185 0.0262662062 0.0175956673 0.0364469537 0.0813855897 -0.0161814700 0.0346817073 0.0730761792 -0.0284784139 -0.0767267209 -0.1296578847 0.0650267031 -0.0515534788 -0.0847637647 0.0721318495 0.0069303124 0.0348671267 0.0225725797 0.0613035124 0.1333696428 -0.0348599112 0.0652753701 0.1250074431 -0.0623283645 0.0065919796 -0.1279722089 -0.0136117851 -0.0455742078 0.1478310292 -0.0504119489 -0.1113671908 -0.1461701182 0.0700647599 0.1248000355 0.2222462797 -0.0232211579 -0.0259386483 -0.0055984032 -0.0160662206 0.0010326893 -0.0112056540 0.0062954224 -0.0449324520 -0.0178658533 -0.0247931349 -0.0274639270 -0.0367507555 -0.0042623776 -0.0728799168 -0.0116835834 -0.0450764965 -0.0401706146 -0.0450724754 -0.0100566109 0.0211913696 -0.0312946990 0.0291489125 0.0077443168 -0.0433491943 0.0273859982 0.0492607324 -0.0366170324 0.0474277505 0.0244552975 -0.0565721203 0.0479017595 0.0044322077 0.0145735104 -0.0071591223 -0.0039701556 0.0161064827 -0.0120071321 0.0079618001 0.0270732127 0.0029277195 -0.0002753701 0.0394285234 0.0068665962 0.0169885381 0.0260353340 0.0077888312 0.0013218454 0.0475210096 0.0148431872 -0.0122862285 0.0292740334 -0.0093623975 -0.0098963501 0.0405101069 0.0011102802 -0.0222666601 0.0302154580 -0.0149255497 -0.0162896786 0.0493684144 0.0045301185 0.0192526902 -0.0582204988 0.0547813001 0.0208063283 -0.0589185985 0.0581674104 0.0147929568 -0.0575857771 0.0578361102 0.0158670005 -0.0577872183 0.0506767959 0.0360159710 -0.0751337480 0.0651388382 0.0403220847 -0.0430049854 0.0953005414 0.0513441076 -0.1145010331 0.0791453470 0.0185100090 -0.0694304201 0.0281067608 0.0061814252 -0.0116570319 0.0045302793 0.0293500802 -0.0103986969 0.0266491124 0.0182379807 -0.0075518704 0.0165325836 -0.0106997176 -0.0022540750 -0.0048272862 -0.0075312554 -0.0076419772 -0.0035250303 -0.0044331417 -0.0009786490 -0.0010997272 -0.0091599008 -0.0040562583 -0.0011540571 0.0011058338 -0.0059960323 -0.0024053131 -0.0014172170 -0.0014077987 -0.0027120959 0.0069638353 -0.0064351426 -0.0034677445 -0.0036027063 -0.0003478837 -0.0005960092 -0.0123431166 -0.0114178484 -0.0046800073 -0.0037369985 0.0031707405 -0.0005198576 0.0023719689 0.0046446041 0.0029980745 -0.0034078491 0.0145507913 -0.0128395305 0.0289390668 0.0494385240 0.0252267640 -0.0457040985 0.0129596223 0.0557960673 -0.0252396969 0.0148749589 0.0544744568 0.0248359432 0.0219366889 0.0485583683 -0.0454848721 0.0351697111 0.0183348550 0.0202327052 -0.0004119884 0.0870437496 0.0422495460 0.0063956205 0.0807842908 -0.0188704171 0.0364806338 0.0158933246 -0.0823768218 0.0488021893 -0.0092046396 0.0345550074 -0.0134652064 0.1136571072 0.0709362788 0.0061912226 0.1009618570 0.0319472572 0.0266520621 0.0438243559 0.0219139099 0.0378464598 0.0210997104 0.0352276329 0.0089462435 0.0363843925 0.0023973897 0.0538534860 0.0209446291 -0.0506968656 0.0535091782 0.0253145418 0.0225815988 0.0010245198 0.0179781405 -0.0421590108 0.1027980169 0.0283413595 -0.0715737515 0.1046577882 0.0301415861 -0.0020032507 -0.0043530724 0.0198013137 0.0587007988 -0.0370255246 0.0122941188 -0.0529060929 0.1404698805 0.0372832230 -0.1070538016 0.1451634196 0.0370016512 0.0131800580 -0.0439383485 0.0140912134 -0.0711424196 0.0564324089 0.0250326315 -0.0418254125 0.0570509172 -0.0168638729 -0.0131279608 0.0463703812 -0.0223554532 -0.0042234288 -0.0061740254 -0.0047732212 0.0145786209 -0.0555637443 -0.0672943656 0.0427953708 -0.0078704746 -0.0714106018 0.1032404036 -0.0196847695 -0.0883842505 0.0146007837 -0.0093550223 0.0212357932 0.0536259733 0.0435202234 0.0417039774 -0.0106339215 0.0185329529 0.0741501622 -0.0602741753 -0.1481989983 0.0276706854 0.0231908548 0.0435845628 -0.0501244176 0.0737833347 0.0667552902 -0.0224810917 0.0582804434 0.0276440628 0.0525010122 0.0787291970 0.0405162736 0.0579674962 0.0570977604 0.0699180969 0.0190179381 0.0104550281 0.0502990035 0.0692080075 -0.0268759369 -0.0135693401 0.0627719080 -0.0354727576 0.0256330309 0.1077897530 -0.0805017761 -0.1786170980 0.1863145580 -0.0332594451 -0.0935168467 -0.0357349211 -0.1161020632 -0.2769318563 -0.0490248049 0.0688801616 0.0638126044 -0.0316976164 0.1157357639 0.0843593024 -0.0442409352 0.0711246437 0.0696292617 0.0311059908 0.0056058759 -0.0171049614 -0.0005026734 0.0067641402 -0.0104175665 -0.0078152095 0.0005569159 -0.0006792990 -0.0181198498 0.0002552468 -0.0086793594 -0.0163966227 0.0017505462 -0.0246258897 -0.0035595776 0.0029427967 -0.0231616528 0.0004083738 0.0110637348 -0.0100487639 -0.0061367131 0.0014530860 0.0057471492 -0.0252023084 -0.0005179627 -0.0019604706 -0.0234384575 0.0045866603 -0.0354047501 0.0022131876 0.0024480676 -0.0276809259 0.0054389267 0.0090851177 0.0161023891 -0.0190229328 0.0004155821 0.0035350945 -0.0166631677 -0.0169424622 -0.0252679905 -0.0031894407 -0.0314696785 -0.0480480661 0.0096808760 -0.0269940515 -0.0404280169 0.0102878489 0.0257213229 0.0435012736 -0.0298435464 0.0098815427 0.0192027371 -0.0256386459 -0.0125904636 -0.0213233717 -0.0061298653 -0.0442769393 -0.0705484179 0.0188943188 -0.0402132555 -0.0604065572 0.0226467226 0.0791908789 -0.2967710315 0.0097878972 -0.0803600888 0.3017723895 -0.0608979177 0.0350714464 0.0525786086 -0.0252714481 -0.0558448182 -0.0902741885 0.0108372368 0.0134911849 0.0007654391 0.0109821089 -0.0057872495 0.0046047167 -0.0054996306 0.0269479597 0.0085615043 0.0187055281 0.0150125259 0.0211697800 0.0045488233 0.0463196042 0.0042987967 0.0338867911 0.0242322444 0.0266494263 0.0096092194 -0.0193984413 0.0179450465 -0.0211178183 -0.0097732977 0.0257948345 -0.0186760548 -0.0388434317 0.0215914683 -0.0347894843 -0.0212327247 0.0346441225 -0.0328999745 -0.0077860150 -0.0101554869 -0.0005303537 -0.0021986595 -0.0108518560 -0.0012942883 -0.0122523824 -0.0167827359 -0.0022646678 -0.0086347347 -0.0233236110 -0.0031497091 -0.0185485259 -0.0160486145 -0.0033511153 -0.0112668362 -0.0272440762 -0.0041833769 0.0019264905 -0.0181796453 -0.0020601346 -0.0018085894 -0.0241425306 -0.0034833469 0.0089157214 -0.0188198947 -0.0015071786 0.0011763942 -0.0287922393 -0.0045807931 -0.0168503349 -0.1127899953 -0.0146730126 0.0132598912 -0.1234053924 0.0453225780 -0.0704938983 -0.1486616278 -0.0232660652 -0.0236272421 -0.1131570678 -0.0222558366 -0.0048540779 -0.0492452177 -0.1295401567 -0.0499074221 -0.0614938210 -0.1329635305 0.0171604341 -0.0268798011 -0.1531922933 -0.0094437572 -0.0450743012 -0.1427634124 0.0148290289 -0.0098791611 0.0199860943 0.0398922782 -0.0083074070 0.0414468186 0.0274622391 -0.0051393504 0.0311551572 -0.0070998409 0.0003868059 0.0060399863 -0.0021480751 -0.0056680814 0.0080231145 -0.0077748752 -0.0062450472 -0.0094286134 -0.0106480059 -0.0020777221 -0.0016168667 0.0092002388 -0.0036965474 -0.0432540324 0.0038443292 -0.0077169932 -0.0268485622 0.0110294927 -0.0029774898 -0.0560378962 -0.0140084571 -0.0052106409 0.0022954110 -0.0095244386 -0.0107104164 0.0029915388 -0.0084190318 0.0003453296 0.0118012376 0.0115155040 0.0036716166 0.0260891117 -0.0269966804 0.0181531159 0.0082477942 -0.0187172097 0.0402246338 -0.0081492649 -0.0085166109 -0.0275614182 0.0426220696 -0.0122516331 -0.0109746794 0.0312635860 -0.0191696998 0.0272326135 -0.0000529728 -0.0132122275 -0.0076470854 0.0133731855 -0.0155550073 0.0064510113 0.0332732844 -0.0192249756 0.0263470706 0.0190110044 -0.0175624388 0.0117649191 -0.0011660623 -0.0117450418 -0.0226386266 0.0101192899 -0.0141378954 0.0045454844 0.0462085282 -0.0186537011 0.0399269353 0.0231549830 -0.0192941616 0.0443304092 -0.0147252391 -0.0224247278 0.0499553189 -0.0271805456 -0.0220769900 0.0496166024 -0.0283620748 -0.0252787373 0.0472147114 -0.0256171584 -0.0482584938 0.0616716159 -0.0304562035 0.0187976314 -0.0227834177 -0.0130634583 -0.0704091079 0.1086314321 -0.0383341258 -0.0842246170 0.1181872465 -0.0405920483 0.0080827622 -0.0166559462 -0.0145240181 0.0602806536 -0.0761174075 -0.0035611303 -0.0933733051 0.1436417094 -0.0448207118 -0.1205970305 0.1683393978 -0.0490968304 0.0427627620 -0.0678703390 -0.0051979586 -0.0591938892 0.0733852401 -0.0332097303 -0.0207798804 0.0156327333 -0.0095309257 -0.0207329477 0.0172173459 -0.0110199759 -0.0049392504 -0.0163571248 -0.0102595799 -0.0158711100 0.0402494841 -0.0483112806 -0.0170061145 0.0013890404 -0.0292285755 -0.0410100841 -0.0040984162 -0.0138009404 0.0836335489 -0.0406907195 0.0047862487 0.1676416747 -0.0225849416 0.0075903859 0.0614860619 -0.1022349371 0.0633152075 0.0982546443 0.0329648774 -0.0283122964 0.0070968296 -0.0475249329 -0.0214236254 0.0280363231 -0.1389418573 0.0314982677 0.2455738206 0.0650186924 0.0580091308 0.0614326168 -0.0187295065 0.0352303013 0.2236478758 -0.0951829558 -0.0731735322 0.0845850834 -0.0879019907 0.0825573169 0.0137983060 -0.1220504535 0.0549442673 0.0631288675 -0.1012661822 0.1087711878 0.1289098896 0.0322843999 -0.0591710617 0.1030473491 0.0490916563 -0.0403523198 0.0694446492 0.0633672822 -0.0112462185 0.0084474696 -0.1329623502 0.1181232484 0.0555177454 -0.2004207941 0.0091148436 0.0395717226 -0.1543141052 0.0071033527 0.0120436965 -0.0075467186 0.0139982620 0.0130977482 -0.0040954927 0.0101827754 0.0083347113 0.0035953629 0.0025961908 0.0045760117 0.0065788664 -0.0001235345 -0.0010096419 0.0127637505 -0.0008549081 0.0031804325 0.0050990966 0.0060417875 0.0194115200 -0.0100122653 0.0146901959 0.0098857694 0.0026267648 0.0018031500 0.0128407543 -0.0159853476 0.0079029685 -0.0044987581 0.0161518265 -0.0035581188 0.0007007124 0.0068654651 0.0062719624 -0.0449374316 -0.0874154266 0.0344201371 -0.0453184565 -0.0859421515 0.0460395717 -0.0172857893 -0.0336171653 0.0238411242 0.0111940969 0.0199619543 -0.0095049364 0.0248346286 0.0342637543 -0.0301782293 -0.0694690636 -0.1413875062 0.0515053059 -0.0690178544 -0.1247695530 0.0677467171 -0.0110488983 -0.0197070007 0.0285787418 0.0278386750 0.0594762879 -0.0222834384 0.0595364486 0.0867885173 -0.0623175415 0.0279568955 -0.0478526385 0.0135261954 0.0057626095 -0.0063415339 0.0107016426 -0.1556709182 -0.2426570753 0.0867605353 0.1387144214 0.2161654922 -0.0284402718 0.0195090933 0.0058590678 0.0192595895 -0.0014632907 0.0099305872 0.0043259883 0.0283984298 0.0187724168 0.0122487317 0.0076932111 0.0373037107 -0.0146784475 0.0501831602 0.0138678300 0.0236620544 0.0112203801 0.0465012732 -0.0237297274 -0.0207045831 0.0293977754 -0.0170349687 -0.0175431177 0.0422107577 -0.0312611499 -0.0415789266 0.0336020509 -0.0249565208 -0.0348776594 0.0548892542 -0.0532480694 -0.0106926916 -0.0012717041 -0.0040751114 0.0031281020 -0.0025496283 -0.0291331370 -0.0284836028 -0.0011728050 0.0228109377 -0.0337878835 -0.0015091837 0.0325288000 -0.0399700513 0.0001758253 0.0366534529 -0.0493796423 0.0002895407 0.0586329287 0.0026776369 -0.0036778287 -0.0278305651 -0.0173456321 -0.0035106889 0.0055274876 0.0159272999 -0.0047956555 -0.0489109612 -0.0198418599 -0.0042415960 0.0109168458 -0.0063134850 0.0403601844 -0.0539710596 -0.0033485065 0.0324301813 -0.0619449071 -0.0072367718 0.0429307680 -0.0508681408 0.0015319091 0.0491402720 -0.0544945160 -0.0232040661 0.0492337646 -0.0541755926 -0.0266053873 0.0267771287 -0.0743636396 -0.0312363749 0.0762322625 -0.0651804216 -0.0126739673 0.0447580478 -0.0290882754 -0.0097016216 -0.0275161180 0.0076198568 0.0254568247 -0.0196692434 0.0242690119 0.0099844193 -0.0159009402 0.0192717185 -0.0364062531 -0.0085516614 0.0134674045 -0.0373514029 -0.0194902615 -0.0000810476 -0.0069493254 -0.0084088681 -0.0100410060 -0.0303020741 -0.0117937043 0.0186970530 -0.0175638876 -0.0143762688 0.0016287820 -0.0188655931 -0.0099914559 -0.0019808853 -0.0122411351 -0.0148908040 0.0022543563 0.0161160324 -0.0190418994 -0.0419044522 -0.0580269433 -0.0224200926 -0.0262988044 0.0032272997 0.0069179982 -0.0565676803 0.0018901369 0.0242286748 -0.0851646097 0.0158026565 0.0146264594 -0.0731948999 0.0888636716 0.1309176133 -0.0332797300 -0.0157214008 0.0114840907 0.0580953828 0.0075510264 0.0336940409 0.0427790530 0.0728607865 0.0924451578 0.0095445968 0.0628408724 -0.0125174186 0.0286480527 -0.0197109610 0.1090194671 0.0410259188 0.0201267929 0.1317985454 0.0213829487 0.0925505627 0.0234393456 0.0032303135 0.0853570830 -0.0686475872 0.0310016800 -0.0670409948 0.1455394333 0.0582260802 0.0052216107 0.1719143890 0.0214107756 0.0866584117 0.1003390075 0.0042896773 0.0894068428 0.0612201520 0.0338055630 0.1059545204 0.0220545480 0.0620889001 0.0734103474 0.0553181131 0.0389656501 -0.0210623262 -0.0167877535 0.0665086019 0.0166736924 0.0782568335 -0.0119166792 0.0817788224 0.0069142841 0.1068147556 0.0372741791 -0.0380517682 0.1215903555 -0.0369772647 0.0458001029 -0.0036607381 0.0057971917 0.1185156171 -0.0618795702 0.1175361076 0.0137126518 0.1531739785 0.0456828072 -0.0802884637 0.1792330057 -0.0879850869 0.0630587521 -0.0517132122 -0.0554450134 -0.0473133539 0.0747617792 0.1450006110 -0.0224091062 -0.0420771752 0.1177613643 0.0222321024 -0.0500485346 -0.0302532444 -0.0209106668 0.0031770096 -0.0133772485 -0.0265436127 -0.0060098366 -0.0107390090 -0.0161852377 -0.0109006197 -0.0209599550 0.0076614999 -0.0329982444 0.0002327351 -0.0021674314 -0.0114980126 0.0213432644 0.0382410705 0.0038520459 -0.0041527121 -0.0502965989 0.0015921997 0.0044168120 -0.0105070691 -0.0021170193 -0.0016754883 -0.0308011441 0.0065339376 -0.0247317361 0.0109716805 -0.0282070382 0.0229676433 0.0455552372 0.0020858190 0.0311740570 0.0362015649 0.0309663995 0.0221469522 0.0599958720 -0.0103269676 0.0068794964 0.0211717588 -0.0623004782 -0.0017636266 -0.1746297752 -0.0389124484 -0.0214867954 -0.0450220128 0.1259342227 0.0046326224 -0.0132237223 0.0095547300 0.0039272843 -0.0057604546 -0.0011973894 0.0046939872 -0.0214716546 -0.0085562318 -0.0450824932 -0.0033067198 -0.0914355050 -0.0361317540 0.0758023667 -0.0147713558 -0.0111090828 -0.0079857696 -0.0040400809 -0.0032342326 -0.0498152016 0.0093921020 -0.0363622048 0.0215395147 -0.0302801788 -0.0347222919 0.0184838538 -0.0249595382 -0.0033836413 -0.0495367299 0.0139206458 0.0373748050 -0.1329432933 0.0579112685 0.0390816125 -0.1365859202 0.0574668140 -0.0645812646 0.0842034722 -0.0621669994 -0.0582774709 0.0718355756 -0.0519566339 -0.0194399215 -0.0137070658 0.0017494616 0.0640668303 -0.1891605304 0.0900616816 0.0724878716 -0.1983150107 0.0914231184 -0.0349741189 -0.0265509495 0.0061879367 -0.0353040437 -0.0262237659 0.0073537358 -0.0346357004 -0.0211389582 0.0063301244 -0.0425792343 -0.0310938437 0.0112603720 -0.0411684879 -0.0302640464 0.0093697540 -0.0333959360 -0.0251782129 0.0052983788 -0.0317619273 -0.0223753999 0.0057714911 -0.0106912156 0.0163698158 -0.0092232876 -0.0429277678 -0.0315590155 0.0114904905 -0.0443139335 -0.0311408961 0.0087705233 -0.0575196181 0.0865744312 -0.0126008177 0.0055566195 -0.0818604883 0.0046852777 -0.0036505511 0.0175084705 -0.0121559602 0.0052028091 0.0500664898 -0.0207744292 0.0040338065 0.0028023901 0.0181757493 -0.0251182637 0.0081281821 0.0122661635 0.0267383344 0.0243325643 0.0187860580 0.0098319230 0.0538864144 0.0068281496 0.0572347930 0.0173217127 0.0248996593 0.0251752499 0.0694419248 0.0053562000 -0.0444819728 0.0399926832 -0.0010674683 -0.0276940822 0.0615013136 -0.0076530302 -0.0761493369 0.0463349505 -0.0086964458 -0.0441582975 0.0826941660 -0.0222427385 -0.0331643503 -0.0189420476 0.0228950899 -0.0174188223 -0.0201143337 -0.0028183893 -0.0413695600 -0.0261475861 0.0251096855 -0.0166111586 -0.0347913629 -0.0136453083 -0.0627052895 -0.0234025963 0.0462105185 -0.0165796672 -0.0371062797 -0.0167501990 0.0084216008 -0.0306012142 -0.0419623092 0.0105558934 -0.0380882560 -0.0546009173 0.0311215023 -0.0325775816 -0.0663320914 0.0337346840 -0.0444232841 -0.0918555341 -0.0243879727 -0.0929497186 0.0392900730 0.0560814752 -0.1747844393 0.0970677828 -0.1476129676 -0.1321079095 0.0627601336 0.0017311271 -0.0266511475 -0.0051537814 -0.0424838336 0.0020162578 -0.0574153041 -0.0912588326 0.0127584930 -0.0368068763 -0.0117791811 -0.0071608529 -0.0677642350 -0.0452602358 0.0202504048 -0.0966050474 -0.0023016445 -0.0120873111 -0.0117693177 0.0267935857 -0.0025074888 -0.0186340843 0.0114480021 0.0008690313 -0.0163074612 -0.0085245069 -0.0024195640 0.0018294898 -0.0057602549 -0.0095235167 -0.0041816614 -0.0072331022 -0.0059732115 0.0015403059 -0.0145987439 -0.0054241356 0.0120772664 -0.0007729378 -0.0108908449 0.0009724113 -0.0067211966 -0.0073158043 0.0071501109 0.0048419482 -0.0110405471 -0.0036978946 0.0017582751 -0.0089132414 -0.0145388905 -0.0010391355 0.0001946464 -0.0082770378 0.0004103200 -0.0273461075 -0.0286230286 -0.0406695594 -0.0306020635 -0.0617998426 0.0402150536 -0.0635649905 -0.0199178082 0.0431800460 -0.0108027637 -0.0036189387 -0.0373206668 0.0686241054 -0.0766322865 -0.0066610341 0.0408182226 -0.0575862971 0.0553373192 -0.0110183975 -0.0122851289 0.0407033828 -0.0031652558 -0.0249750697 -0.0124567316 0.0460664841 -0.0606878074 0.0244021743 0.0141806042 -0.0388482860 0.0748485878 -0.0290353921 -0.0053501486 0.0529968249 -0.0097435019 -0.0164635095 -0.0465406052 0.0742127070 -0.0801062071 0.0166283753 0.0145081555 -0.0446351356 0.0441089010 -0.0147619503 -0.0043539143 0.0434299867 -0.0342228795 0.0065015772 0.0507694837 -0.0463357271 0.0100046698 0.0321654538 -0.0181636986 0.0020868271 0.0055453499 -0.0174710518 0.0030046505 0.0645733177 -0.0777205590 0.0084284933 -0.0209636611 0.0504425234 -0.0068383019 -0.0379082892 0.0544032812 -0.0069338575 0.0568459372 -0.0848524029 0.0102913668 0.1060634512 -0.1289974237 0.0147756506 -0.0438636808 0.0940461073 -0.0076450051 -0.0786194472 0.1079779397 -0.0116750477 0.0916455032 -0.1419199567 0.0161688991 -0.0009001276 -0.0202215939 0.0038042881 0.1277160840 -0.0769385165 0.0046473432 0.0974812141 -0.0607923662 0.0088050729 -0.0106036764 -0.0111640642 0.0111665798 -0.0246007619 -0.0169776106 0.0581980031 -0.0466506428 0.0124726766 0.0302298776 -0.0751238422 0.0306429508 0.0257824648 -0.0147219078 0.0167191274 0.0219232691 0.0057174664 0.0155912673 0.0195634930 -0.0119956322 -0.0267925226 0.0220630652 0.0308347909 0.1006554096 0.0200137775 -0.0664368600 0.0415205239 -0.0076047792 -0.1018775412 0.0803184098 -0.0497555293 -0.0054174613 -0.0087601016 0.0183568842 0.0355644113 0.0139572622 0.0183328965 -0.0026142090 0.0431230960 0.0218272950 -0.0192651791 -0.0352632852 0.0210102408 -0.0227166743 -0.0287607146 0.0209702140 0.0055628418 -0.0315779617 0.0282159557 0.0973529984 0.0922992004 -0.0144119733 0.0243313869 0.1500371083 0.0344430094 0.0111152956 0.1309475631 0.0371179590 0.0434681447 0.1281902031 -0.0070076333 -0.1905961510 -0.0467748256 -0.0118578134 -0.1829469915 0.1925193626 -0.1614514972 -0.0007610096 -0.0155273210 -0.0047426906 0.0394159702 -0.1328755953 0.0721715987 0.0292811102 -0.1058318239 0.0719302289 -0.0115208805 0.0190202338 0.0090082118 -0.0528701195 0.1328339261 -0.0628535502 -0.0523273804 0.1182507004 -0.0719310308 0.0718822899 -0.2402523685 0.1198389667 0.0497377343 -0.1733458031 0.1134304028 -0.0082598078 0.0305633048 0.0230772020 -0.0849220332 0.2339551289 -0.1131603948 -0.0929202255 0.2103788175 -0.1299856977 -0.0146132981 -0.0137924804 0.0114055378 -0.0145201371 -0.0141334901 0.0083396337 -0.0105069727 -0.0132218739 0.0060897744 -0.0120430232 -0.0184195163 0.0101266435 -0.0123459903 -0.0172017926 0.0126875261 -0.0148366864 -0.0114251784 0.0113826201 -0.0146247092 -0.0109366660 0.0053715379 0.0019043013 0.0036895954 -0.0069913854 -0.0101642859 -0.0193414282 0.0092497233 -0.0112548790 -0.0181849604 0.0143525223 0.0236779083 -0.0248298068 0.0341158133 -0.0374043675 0.0980937028 0.0240442450 0.0094731762 0.0019814598 -0.0098313028 0.0058679754 0.0211186933 -0.0151655026 0.0109445948 0.0133268125 -0.0126347848 0.0002292957 0.0146615831 -0.0032530280 0.0288797150 0.0301703650 -0.0131518926 0.0295060081 0.0499187762 0.0005153340 0.0446067938 0.0262675630 -0.0239211087 0.0422352062 0.0606192832 0.0026720427 -0.0022200251 0.0376965301 0.0075290427 0.0146385256 0.0534347874 0.0093542809 -0.0181646227 0.0412574576 0.0151701276 0.0143750324 0.0670980376 0.0182707134 -0.0169522167 -0.0124450290 0.0169474896 -0.0005545731 -0.0144779330 -0.0026044553 -0.0299190150 -0.0205834985 0.0267101128 -0.0127943412 -0.0304002393 0.0032437121 -0.0514095498 -0.0178206512 0.0465978171 -0.0196000554 -0.0339565965 0.0090113426 0.0198402337 -0.0253820267 -0.0303285077 0.0148865678 -0.0335772575 -0.0324859898 0.0415294011 -0.0272671245 -0.0511441307 0.0320167333 -0.0408791700 -0.0574733045 -0.0239485425 -0.0362852172 0.0673478329 0.0133898460 -0.0797684464 0.0840147106 -0.0796767320 -0.0511846243 0.0806368450 -0.0068231949 -0.0005188073 0.0461848129 -0.0314110838 -0.0085429542 0.0445835638 -0.0371117810 -0.0309073242 0.0241248619 -0.0412084108 0.0219687271 0.0325665061 -0.0157095138 -0.0075935082 0.0680405554 -0.0021205590 0.0178098474 -0.0095547221 -0.0494045353 0.0202422400 -0.0666043117 -0.0283174255 0.0147986473 -0.0442469567 0.0038715031 0.0067867150 -0.0236233457 0.0210717777 0.0083838645 0.0101882201 -0.0272892112 0.0148538830 0.0072779409 -0.0128190545 0.0094261158 -0.0212009296 0.0012952864 0.0033566258 0.0053186903 -0.0089977037 0.0167912096 0.0096587410 0.0121212282 0.0024463192 0.0052541391 -0.0398645699 0.0232570240 0.0229017338 0.0405011206 0.0190087132 0.0345731213 -0.0105050622 -0.0902091671 0.0005787644 -0.1526734328 -0.1357250463 -0.0611061502 0.1176402050 -0.2003597664 0.0119865986 -0.0048758761 0.0126241660 0.0266491111 0.0958786106 -0.0182825834 0.0512824938 0.0601157027 0.0060468186 0.0346139156 -0.0106440858 0.0507299882 0.0088781864 0.0632086352 0.0010490887 0.0479524218 0.0059712477 0.0463199406 0.0011507778 -0.0268231376 0.0651246752 -0.0120925480 0.0193018511 0.0308689470 0.0271012067 0.1004562990 -0.0219020091 0.0730197083 -0.0058381585 0.0563416187 -0.0099098828 -0.0603889419 0.0796882310 -0.0331383811 -0.0135007308 0.0368404468 0.0190617869 -0.0135882138 0.0270046927 0.0276543275 -0.0097684372 0.0140662146 0.0399162816 -0.0067374542 0.0234429737 0.0329281015 0.0128498531 0.0338147579 0.0342353119 0.0561361954 -0.0546388126 0.0641862678 -0.0589305928 0.1017832441 0.0059690773 -0.0526431214 0.1133393478 0.0030938384 0.0713374399 -0.0561448213 0.0656014351 0.0989015990 -0.1199088940 0.0909002875 -0.0985070210 0.1605466329 -0.0056109278 -0.0939119350 0.1791363991 -0.0229666882 0.1290210163 -0.1273615201 0.0891893339 0.0209658848 0.0384716758 0.0330287040 0.0095276451 0.0387589355 0.0194120559 0.0625645230 -0.0184693824 0.0259979379 0.0124429826 0.0469340700 -0.0010342102 -0.0052757931 -0.0144957406 -0.0090714071 0.0042579354 -0.0036159085 -0.0091667838 0.0467284369 -0.0571255047 0.0295453886 0.0124996087 -0.0502016372 0.0140285944 0.0101697150 -0.1157268208 -0.0139234190 0.0144159702 0.0362267507 0.0001447104 -0.0109593605 -0.0653815434 -0.0023316565 -0.0346295123 0.0644643455 -0.0585001672 -0.0123314649 0.0442546769 -0.0334402708 0.0552117242 -0.0890161451 0.0255067176 -0.0650055457 -0.1091126256 -0.0582307564 0.0434129100 -0.2017170809 -0.0371657730 0.0026025670 -0.0459157395 0.0752486127 0.0212940887 0.1985871023 0.0530885979 0.0184261514 0.0351502575 -0.1657130875 0.0073415747 -0.0836482008 0.0592075819 0.0037710680 -0.0176201358 -0.0371171217 -0.0568804625 -0.1126433212 -0.0310468179 0.1047265445 0.0914499825 0.0674334867 -0.0432909913 -0.1111696701 -0.0320185191 -0.0827975201 0.1416252822 -0.1190235989 -0.0043271969 0.0321045665 -0.0103682663 -0.0348871985 0.1076774663 -0.0550497270 -0.0303918710 0.1022007664 -0.0531635744 -0.0029423027 0.0371958181 -0.0174177589 0.0205527975 -0.0191631566 0.0156035546 0.0252300760 -0.0267206556 0.0217792379 -0.0583798084 0.1691321695 -0.0841772823 -0.0472024704 0.1422345404 -0.0735902977 0.0052295687 0.0117605582 -0.0124344086 0.0392903703 -0.0658883046 0.0407875328 0.0516076042 -0.0797181347 0.0521080035 0.0138487421 0.0586132162 -0.0095599966 0.0171807410 0.0638920433 -0.0177684431 0.0206637872 0.0625201236 -0.0198558878 0.0418435271 0.0813733010 -0.0259671494 0.0356355042 0.0742016500 -0.0165011078 0.0055549595 0.0577440832 -0.0050200604 0.0101164306 0.0569458860 -0.0151078312 -0.0219275206 -0.0001893435 0.0005157685 0.0511442801 0.0861181687 -0.0316054136 0.0426213128 0.0797911827 -0.0186411738 -0.0118672179 0.0730689136 -0.0192843111 0.0258007950 -0.0730588177 -0.0009476282 -0.0451475561 -0.0290068854 0.0101538167 -0.0381023796 -0.0334453098 0.0112288552 -0.0211335588 0.0038436759 -0.0355406649 -0.0014275483 0.0001308733 -0.0260315931 -0.0233292742 -0.0114581384 -0.0145403117 0.0091154702 -0.0334659906 0.0319199323 -0.0448448653 -0.0065358980 -0.0232391855 0.0151535587 -0.0455598940 0.0594788101 0.0244920672 -0.0218171642 0.0057983853 0.0342434390 -0.0385469089 0.0441864388 0.0457151306 -0.0262271417 0.0109111477 0.0617279673 -0.0544653017 0.0819382886 -0.0110174327 -0.0025945599 -0.0186322440 -0.0023666787 -0.0053161850 -0.0014845929 -0.0221442443 -0.0198018694 -0.0220189718 -0.0194404364 -0.0373274313 -0.0122372205 -0.0350389197 -0.0180612200 -0.0273064449 -0.0285151174 -0.0490590101 -0.0134790514 0.0019471012 -0.0227910828 0.0076702945 -0.0069751681 -0.0385204457 0.0013479141 0.0123361044 -0.0238251315 0.0215060958 -0.0046019480 -0.0512746534 0.0091627037 -0.0232973466 -0.0130242219 0.0006234390 0.0168461628 -0.0593777926 0.0189910485 -0.0886767699 -0.0107604700 0.0364922427 -0.0161098704 0.0322083859 -0.0443609424 0.0021370500 -0.0337021992 -0.0222049275 0.0057475401 -0.0586421012 -0.0463659258 -0.0002893647 -0.0058265626 -0.0365476705 0.0032397016 -0.0444215012 -0.0012599953 -0.0053463391 0.0154092007 -0.0038515095 -0.0261339952 0.0182636874 -0.0389454856 -0.0197568715 0.0163937578 -0.0286931812 0.0028797087 0.0114517247 -0.0239640629 0.0206184635 0.0083628232 0.0092647027 -0.0200222952 0.0242599538 0.0085578520 -0.0091433009 0.0157203278 -0.0208654488 0.0113091486 0.0153611458 -0.0105052297 -0.0015374075 0.0261504641 0.0033422411 0.0238161859 0.0145914411 -0.0148166232 -0.0378154065 0.0365550951 0.0332951394 0.0487468763 0.0205395487 0.0388061278 0.0001977928 -0.0603400793 0.0257922304 -0.1013248302 -0.1131490520 0.0109083455 0.0926188933 -0.1354700621 0.0278237130 0.0058836174 0.0103081483 0.0155706450 -0.0243931987 0.0276437879 0.0074650812 -0.0109737395 0.0233258913 0.0104240632 0.0144912844 0.0183998111 0.0111863089 0.0068487743 0.0087091788 0.0119656426 -0.0087155994 0.0292312846 0.0137463684 0.0061801850 0.0252010299 0.0157742605 0.0212196049 0.0055158828 0.0132801867 0.0087777409 0.0002015733 0.0110378845 -0.0185460402 0.0369591740 0.0142484926 0.0085339907 0.0305225538 0.0189763514 0.0026605685 0.0292081770 0.0016272236 -0.0072349592 0.0269373724 -0.0144438551 -0.0029607496 0.0247046795 -0.0220787104 -0.0159204728 0.0280993877 -0.0167887987 0.0412273635 -0.0076085563 -0.0077858064 -0.0733080023 0.1246042106 -0.0311105809 0.0591515278 -0.0759098285 -0.0002929771 0.0991833407 -0.1053119133 0.0063482946 -0.0527642402 0.1191085542 -0.0300054238 -0.1415859286 0.2117929714 -0.0453644249 0.0936710844 -0.1287268239 0.0100435187 0.1688320434 -0.1975468177 0.0165068034 -0.1095965762 0.2081372132 -0.0419732848 0.0632221942 -0.0274996532 -0.0032157603 0.0360884938 -0.0066650758 0.0163244775 0.0604019090 -0.0417588865 0.0219954124 0.0083700929 0.0422913299 -0.0005106452 -0.0191209684 0.0077553579 -0.0383270744 -0.0094856867 0.0041718699 -0.0279109669 -0.0270348000 0.0501454574 -0.0727063708 0.0066935615 0.0363302574 -0.0157751029 0.0291326924 0.1172404777 0.0187397811 -0.0081367627 -0.0859653040 0.0309993659 0.0067299881 0.0174651488 -0.0041127745 0.0319909613 -0.0612938667 0.0477062153 0.0448824091 -0.0493616137 0.0527718431 0.0019629411 0.1100075673 -0.0094276704 0.0768527629 0.1109289375 0.0682520267 0.0096021099 0.1809827845 0.0245496877 -0.0067288565 -0.0219126120 -0.0388444086 -0.0452591670 -0.2656012358 -0.0283967296 0.0149704136 -0.0927476908 0.2181816318 -0.0175544270 0.0263516175 -0.0172304498 0.0029367654 -0.0136175447 0.0048192023 0.0289738193 0.0264262051 0.0016153516 -0.1391216553 -0.1189172493 -0.0703769821 0.1325372188 0.1702849178 0.0256076812 0.1511752516 -0.1966563484 0.2095848556 -0.0072711512 0.0193050486 -0.0016173712 0.0190271531 -0.0354467066 0.0267561833 0.0193401592 -0.0416285310 0.0216956544 -0.0057537553 -0.0012257240 -0.0037168185 -0.0356946273 0.0570079865 -0.0336556157 -0.0399625964 0.0714983063 -0.0339517780 0.0378113561 -0.0729943495 0.0467338835 0.0384429845 -0.0779796207 0.0369897090 0.0057004732 -0.0348206313 0.0094724904 -0.0544773252 0.0892854027 -0.0539477572 -0.0682523357 0.1166549880 -0.0550358541 0.0077398961 0.0531119953 -0.0098491606 0.0008463069 0.0437004606 -0.0137611559 -0.0015438488 0.0285484166 -0.0103915938 0.0122883537 0.0365336297 -0.0102888454 0.0159895656 0.0444028174 -0.0051742264 0.0078169815 0.0647158482 -0.0107065351 -0.0066714877 0.0414211595 -0.0158252565 -0.0283122427 -0.0135890147 -0.0017866434 0.0141268436 0.0282960099 -0.0103832665 0.0213238635 0.0447092041 -0.0029200771 0.0343673002 -0.0956386674 0.0200160342 -0.0074633822 -0.0102368228 0.0125459478 -0.0485468963 -0.0493036447 0.0064968599 -0.0311354660 -0.0178975910 -0.0013346158 -0.0166495943 0.0098110919 -0.0268361161 -0.0034260189 0.0075459191 -0.0292769212 -0.0155503730 -0.0034059342 -0.0043033717 0.0079208475 -0.0214432706 0.0276728577 -0.0282386171 -0.0003831923 -0.0026738717 0.0146741687 -0.0324906868 0.0546792059 0.0137681288 -0.0099999550 -0.0096227309 0.0230840729 -0.0248307532 0.0253865586 0.0270813886 -0.0128844939 -0.0113564408 0.0428704014 -0.0386530062 0.0509483181 -0.0057289124 0.0072660723 -0.0223923610 0.0052167510 0.0054936314 -0.0132086698 -0.0209105473 -0.0066669110 -0.0164099096 -0.0253035811 -0.0212147170 0.0042048208 -0.0333793735 -0.0051827901 -0.0209771889 -0.0399814723 -0.0308418558 0.0142257634 0.0053035817 -0.0097808475 0.0015871231 -0.0119408888 -0.0227099426 0.0128158050 0.0168450165 -0.0108794225 0.0093491008 -0.0150549863 -0.0334742364 0.0289811831 -0.0209859707 -0.0161356225 -0.0232627802 -0.0445252543 0.0228858886 -0.0112856886 0.0136981115 -0.0312209867 -0.0562797796 -0.0337838144 -0.0577748782 0.0104027173 -0.0241146095 0.0140049693 -0.0448455026 -0.0274747459 0.0342012034 -0.0252487646 -0.0153589442 -0.0095970869 -0.0351651142 -0.0282951829 0.0170219927 -0.0627683828 -0.0107015920 -0.0685738001 -0.0131099000 0.0212616465 -0.0566042266 -0.0219641307 0.0047217660 -0.0530656635 -0.0125652081 -0.0062325325 -0.0321013109 0.0284265646 -0.0152290438 -0.0594203667 -0.0010637958 -0.0065192654 -0.0161725612 0.0238959519 -0.0055340015 -0.0158469889 0.0390986336 -0.0609929884 0.0038067323 0.0555998274 -0.0176328522 -0.0107145057 -0.0074953477 -0.0797880896 0.0047790157 0.0619204509 -0.0001369094 -0.0200671579 0.0209855127 -0.0303352865 -0.0772972230 -0.0022278417 0.0003389623 -0.0181776963 0.0192065654 0.0404779006 -0.0247429971 0.0653021750 -0.0212952818 0.0364506224 -0.0248964836 0.0419544670 0.0666864551 -0.0365418904 -0.0768216759 -0.0041524099 0.0173886789 -0.0412651637 0.0021681566 0.0130475224 0.0381872397 0.0295373885 -0.0084915689 -0.0217083020 -0.0097875687 -0.0211461832 -0.0108166499 0.0191653763 0.0422198845 0.0301705944 0.0331994961 0.0303856786 0.0234613803 0.0005562104 -0.0294838265 -0.0403327990 -0.0298855458 -0.0432662398 -0.0201298842 0.0246889049 0.0723906470 0.0520970953 0.0503653301 0.0515712404 0.0427399238 0.0529633087 -0.0275038436 0.0372680995 0.0419070991 -0.0289645691 0.0483982259 0.0212386102 -0.0224541569 0.0296982004 0.0294419562 -0.0258311316 -0.0063172696 -0.0124874319 -0.0160510915 0.0227194652 0.0106685316 -0.0454810672 0.0178996029 0.0291189572 -0.0031533255 0.0000573522 0.0084382413 0.0027497302 0.0045819413 -0.0110758408 -0.0403755586 0.0322875509 0.0106084374 -0.0649281819 0.0216074008 0.0440320051 0.0116744388 -0.0084700288 0.0081040633 0.0223095325 0.0002938173 -0.0282042706 -0.0554093973 -0.0197357318 -0.0301103976 -0.0113773078 0.0519965689 -0.0218183445 -0.0529114201 0.0303955897 0.0045218371 -0.0580508844 0.0334261702 0.0336814369 -0.0700993684 -0.0115999667 0.0144753460 -0.0025537272 -0.0084811157 0.0101776534 0.0061069860 -0.0028927598 -0.0094197537 0.0232387359 -0.0038997173 -0.0074895678 0.0168009151 -0.0022001413 -0.0460162732 0.0011846111 -0.0058326944 0.0006839400 0.0244568666 -0.0209935274 0.0194015773 -0.0180373454 -0.0152482891 0.0213389804 -0.0101617691 -0.0118338492 0.0014934220 0.0011441343 0.0335131707 -0.0069948678 0.0248584146 -0.0712613815 -0.0415047818 -0.0196041485 0.0242882553 -0.1170892210 -0.0162336161 -0.0226099061 -0.0668250410 0.0748864011 -0.0213900145 0.0905515585 0.0533895441 0.0316309300 -0.0100644224 -0.0645951830 -0.0116271747 0.0195681773 -0.0286266950 -0.0095418586 0.0282151121 -0.0450801884 -0.0539156755 0.0352946989 -0.0096861288 0.0210823551 0.0164092129 0.0419135415 -0.0219027593 -0.0536779209 0.0009437016 -0.0308335902 0.0279760892 -0.0332460700 -0.0052588016 -0.1000614275 0.0006898802 -0.0047316906 -0.1460147303 0.0401776137 -0.0123706747 -0.1270303097 0.0488591392 -0.0207411669 -0.0772594975 0.0285109349 -0.0081655361 -0.0663065167 0.0076154775 -0.0064500862 -0.0810445427 -0.0049435586 -0.0077435533 -0.1867791275 0.0514676114 -0.0149600125 -0.1381549407 0.0601802486 -0.0451576953 -0.0009945709 0.0230516961 -0.0047291529 -0.0318648167 -0.0025893109 -0.0099877101 -0.0614054485 -0.0214640640 0.0688145575 0.0653339536 -0.0799160633 0.0896900641 0.0941821553 -0.0744543584 0.0750335636 0.1023948154 -0.0674894037 0.0878437555 0.1390265378 -0.0950800067 0.0689345236 0.1013662074 -0.0963593097 0.0604280213 0.0403341783 -0.0737201499 0.0924672064 0.0789460117 -0.0592541616 -0.0114873205 -0.0105785688 0.0328925503 0.0875608229 0.1615485776 -0.0977922233 0.0610039716 0.1068896505 -0.1069341484 -0.0502029655 0.0218126130 0.0207426037 -0.0604999871 0.0486748985 0.0191104322 -0.1108345535 -0.0502451513 0.0725843973 0.0051582413 -0.0837632027 0.0868267704 0.0042605709 -0.0325278928 0.0012113156 -0.0033516543 -0.0284518480 0.0191422779 0.0104375366 -0.0222250162 -0.0063122755 0.0074064835 -0.0121229294 -0.0046373921 0.0153957746 -0.0235864730 -0.0152820568 0.0110399673 -0.0042601559 -0.0113565197 -0.0092240786 -0.0201500913 0.0138607224 -0.0048166408 -0.0098223322 0.0035245627 -0.0173968919 -0.0183744607 0.0150945265 -0.0111902865 0.0019624062 0.0002181170 0.0015801329 0.0159521639 0.0196251125 -0.0625789050 0.0242821704 0.0733238388 0.0995997547 0.0604033083 -0.0750498016 0.0953717708 0.1089986031 -0.1085671736 0.1884540397 0.0499048188 -0.1248203395 0.1753110331 0.1299513851 -0.2036396711 -0.1026691441 0.0805216507 0.0924150885 -0.0165686228 0.1221117853 0.0015499891 -0.1945720236 0.0885760645 0.1545782683 -0.0349219593 0.1570714668 0.0019660508 -0.0280675652 0.0141576019 0.0062403840 -0.0000923321 -0.0159859151 0.0228520368 -0.0725355058 0.0133739202 0.0282351815 -0.0241328064 0.0416105563 -0.0230534350 -0.0261576913 0.0285851088 -0.0303213904 -0.0493587706 0.0197986967 -0.0333159264 -0.0180908435 0.0396262735 -0.0409672851 -0.0231302106 0.0329541337 -0.0337195188 -0.0075394325 -0.0163944868 -0.0141102246 0.0506298187 -0.0142778960 0.0350806740 0.0329012716 -0.0099225266 0.0325784661 -0.0024971779 -0.0099611321 0.0356411664 -0.0078276767 -0.0150096182 0.0129213836 0.0120772374 -0.0333738013 -0.0033366304 0.0034487053 -0.0172475638 0.0320481440 -0.0151681932 -0.0239786722 0.0112458192 0.0027571596 -0.0360466183 -0.0131218494 -0.0290727148 -0.0227631732 0.0107255051 0.0284351207 -0.0524735080 -0.0217539866 -0.0103461431 -0.0077478979 0.0001324566 0.0101696518 -0.0176273441 -0.0244791642 0.0097631677 0.0092995486 -0.0648364133 0.0037489831 -0.0352603446 0.0051836965 -0.0504510567 0.0208846964 0.0169781582 0.1104494264 -0.0155604853 0.0451346232 0.0605411449 0.0102288961 0.0275107401 -0.0422916541 0.0531063620 -0.0006563362 0.0704585438 -0.0014591660 0.0565334371 -0.0194208970 0.0587282636 -0.0246011740 -0.0642305019 0.0734459569 -0.0339115635 0.0044366842 0.0327626259 0.0324129570 0.1252840458 -0.0308063225 0.0947481678 -0.0375878949 0.0746483885 -0.0510057787 -0.1086698940 0.0903780685 -0.0618441393 -0.0521445148 0.0388880784 0.0060684757 -0.0551197062 0.0491216835 -0.0000172782 -0.0580098148 0.0496734708 0.0059836318 -0.0383547875 0.0288471811 0.0088505061 0.0177820744 -0.0089239847 0.0209474455 -0.0577871597 0.0725492282 0.0099078422 0.0081153935 -0.0305288634 0.0161095709 0.0380127001 -0.0511153465 0.0210097720 -0.0327831246 0.0566332615 0.0144242121 -0.0987174356 0.1219978797 0.0056119359 0.0242548361 -0.0599006735 0.0163893427 0.0752815135 -0.1000439327 0.0252013606 -0.0531120876 0.0940069788 0.0134375707 0.0396480935 -0.0261201111 0.0248246276 -0.0080083841 0.0426189736 0.0354874686 0.0068166558 0.0239595215 0.0397746546 0.0034523067 -0.0454311780 -0.0194299113 -0.0054999350 0.0158475760 -0.0154301453 0.0139720377 -0.0109247696 0.0119878103 0.0620905688 -0.0714547220 0.0534626974 0.0012987510 -0.0531055616 -0.0091142984 -0.0348840153 -0.1277326806 -0.0398063508 0.0172140110 0.0569985926 -0.0603045910 -0.0371566100 -0.1055024580 -0.0200637082 0.0023554425 0.0118121957 -0.0019831339 0.0172841249 -0.0133639500 0.0207052156 0.0051005961 -0.0926430387 -0.0098230993 -0.1125135133 -0.1199942811 -0.0834178809 -0.0061132491 -0.2161356604 -0.0515834068 0.0060747074 0.0082290066 -0.0227703215 0.0633402063 0.1829134278 -0.0177610985 -0.0005283292 0.0618720627 -0.2007977853 -0.1016131475 -0.0928044651 -0.0082414699 -0.0321875141 -0.1623378179 -0.0305446545 -0.0150667397 -0.1164208258 -0.0256634153 -0.0462755746 -0.0337834360 0.0067903221 0.0551713336 0.0363882277 0.0036029420 0.0523412099 -0.0616810779 0.0635870163 -0.0310063363 0.0005435129 -0.0537154976 -0.0268692128 -0.0393406355 -0.0210336465 -0.0363843350 -0.0195266747 -0.0146391864 -0.0440394759 0.0319289505 -0.0357176407 -0.0608527051 0.0997835044 -0.0862965641 -0.0622779914 0.0854645445 -0.0960767259 -0.0139423371 -0.0991125994 0.0029360093 -0.0309971101 -0.0552063925 0.0115915795 -0.0120225705 -0.0223620512 0.0424941989 -0.0671124773 0.1480062216 -0.1065156421 -0.0780414445 0.1271324838 -0.1252136566 0.0108278152 -0.0570149515 -0.0063340747 0.0215348590 -0.0421085545 0.0021072418 0.0232536068 -0.0197912314 -0.0013784116 0.0092125847 -0.0182179607 -0.0104320775 0.0015266271 -0.0344706012 -0.0190465955 0.0115893390 -0.0766216797 -0.0051866052 0.0288603493 -0.0452429319 0.0088438418 0.0386433217 0.0093931970 0.0113839121 0.0063714934 -0.0011124610 -0.0108110104 -0.0047079636 -0.0314925394 -0.0251609653 0.0704859027 -0.0540064202 0.0675522845 -0.0598752871 -0.0466006377 0.0916591258 0.0378236562 0.0396455318 0.0113978764 0.0522743691 0.0056948702 0.0215855229 0.0414817542 0.0062431661 0.0518837940 -0.0016827605 0.0138218211 0.0193825246 0.0840498124 0.0370906263 0.0657460110 0.0359118495 0.0846054413 0.0046012295 0.1491418817 0.0225436258 0.1065311729 0.0577135323 0.1047366285 0.0053985812 -0.0597278407 0.0668024980 -0.0482697371 -0.0450311914 0.0996808452 -0.0731372355 -0.1265404997 0.0797399817 -0.0849984139 -0.0961192298 0.1316221614 -0.1416151814 0.0037649668 -0.0108679507 0.0260026847 -0.0127494027 -0.0096729353 0.0258618887 0.0311430304 0.0002655627 -0.0017915379 0.0347960188 0.0151681893 -0.0218753525 0.0541126766 -0.0025953764 -0.0144784689 0.0605057862 0.0235569194 -0.0503925380 -0.0193871033 0.0070379871 0.0222322555 0.0052365244 0.0190025077 -0.0027573079 -0.0398965445 0.0088628861 0.0302594948 0.0044302993 0.0300926971 -0.0119080715 -0.0249314428 0.0734898147 -0.0377532423 -0.0356073814 0.0778473741 -0.0581241200 -0.0131371718 0.1132120288 -0.0034086708 -0.0398309564 0.0813739654 -0.0675130519 0.0113904978 -0.0074175840 0.0009211002 0.0270539455 0.0086155855 0.0143300538 0.0245383443 -0.0351318132 0.0092432725 -0.0067002802 -0.0147501175 -0.0166117186 0.0290090025 -0.0134288649 0.0334585945 0.0129820395 -0.0172719032 0.0313909394 0.0139311280 -0.0174005831 0.0209020034 0.0156233775 -0.0084645063 -0.0144634542 0.0208364815 -0.0108926601 -0.0046781746 -0.0074253122 0.0148553299 0.0105409432 -0.0035087082 0.0007296767 -0.0141002643 0.0195563851 0.0096839549 -0.0312300944 -0.0125927902 0.0179638446 0.0238925602 0.0380225420 0.0090261173 -0.0435240256 -0.0141113614 0.0293054108 0.0174379159 0.0184259428 -0.0157364194 -0.0072919306 0.0068467190 0.0066430171 0.0233550854 0.0249027985 -0.0223394533 0.0841019960 -0.0013234329 0.0483843410 -0.0186920139 0.0294317223 0.0969259572 -0.0527932337 -0.0740195003 -0.0401093439 0.0565958220 -0.0463048117 -0.0145000966 0.0390430573 0.0204671734 0.0540439304 -0.0162366006 -0.0280245262 -0.0224796043 -0.0123853056 -0.0236671995 0.0230831248 0.0671071866 0.0110755531 0.0581550910 0.0400543321 0.0087639505 0.0094675373 -0.0368827190 -0.0419056422 -0.0601592240 -0.0357438776 -0.0313508766 0.0265503258 0.1100069753 0.0343690752 0.0870352391 0.0649965411 0.0296596686 0.0884068941 -0.0465019413 0.0210013100 0.0718300352 -0.0472949795 0.0366215492 0.0425470092 -0.0385404449 0.0224696924 0.0399194207 -0.0396434977 0.0043933800 -0.0168757863 -0.0280831696 -0.0035784630 0.0517131898 -0.0662176244 0.0398779633 -0.0010015510 -0.0095599817 0.0329169527 -0.0297791017 -0.0022928062 -0.0151923707 0.0260710694 -0.0602684473 -0.0186070469 0.0839916946 -0.0930272895 0.0580330876 -0.0079533717 0.0095359688 0.0479204926 -0.0625045857 0.0225071512 -0.0387202002 0.0385665404 -0.0795731902 -0.0039849721 -0.0401521928 -0.0220797965 0.0335674122 -0.0070924385 -0.0659862472 0.0233476927 0.0119804011 -0.0731865504 -0.0296703873 0.0189148448 0.0465798598 -0.0203933501 0.0269684061 0.0006035247 -0.0056599262 -0.0010282530 0.0309844077 0.0311259939 -0.0684708693 0.0850677208 -0.0023097976 -0.0544890830 0.0131300338 -0.0385326805 -0.1606324639 -0.0317149021 0.0150405436 0.0579496596 -0.0407177602 -0.0162175396 -0.0454821420 -0.0092466599 -0.0240230163 0.0309177695 -0.0062872417 -0.0249433925 0.0007899086 0.0072561678 0.0312489935 -0.0951833597 0.0187752635 -0.1754885504 -0.1485774410 -0.0932468461 0.0134022403 -0.3088913678 -0.0598704747 -0.0022471296 -0.0327492054 0.0356831117 0.0531481889 0.2513366366 0.0235672010 0.0135744834 0.0582771373 -0.2458281695 -0.0438917828 -0.0321566351 -0.0396202435 -0.0159972974 -0.0847036961 -0.0088136901 -0.0012636726 -0.0193439873 0.0065972930 -0.0021519975 0.0125220396 0.0468842815 -0.0346858044 -0.0498256153 0.0068418647 -0.0380353346 0.0193813844 -0.0295580541 0.0356369694 -0.0111965419 0.0466939357 0.0663003904 -0.0563207063 0.0641912439 0.0595482879 -0.0474482073 0.0425875097 0.0302484359 -0.0050634147 0.0137785255 0.0009885734 0.0333392870 0.0027869921 0.0048651794 0.0350530177 0.0171517035 0.0931953841 -0.0912200275 0.0868829674 0.0749854940 -0.0684030877 0.0471801725 0.0276686747 -0.0113167785 -0.0097775755 -0.0255510157 0.0640053107 -0.0204736972 -0.0193674718 0.0711869615 0.0019276117 -0.0460726675 0.0225530918 0.0376152541 -0.0440092749 0.0282253683 0.0199406242 -0.0330043562 0.0311774188 0.0121096886 -0.0220507842 0.0204460049 0.0275403847 -0.0270413636 0.0185846407 0.0442144484 -0.0559042551 0.0317253907 0.0420886322 -0.0446130566 0.0350895785 0.0140682985 -0.0266040879 0.0375770961 -0.0278174486 -0.0074987964 0.0159027303 0.0201255679 -0.0233577908 0.0169686704 0.0477072108 0.0176706389 -0.0494092044 -0.0111596041 0.0389313540 0.0150194525 -0.0276827497 0.0111452511 0.0376741772 -0.0428894352 -0.0582372509 0.0404314847 -0.0478687603 -0.0004048270 -0.0220867829 -0.0086115627 0.0238023794 -0.0249736543 0.0063906314 -0.0468152035 -0.0381337197 -0.0523091051 -0.0387165455 -0.0646102441 -0.0536359217 -0.0910355866 -0.0283225988 -0.0821999242 -0.0746377894 -0.0733710598 -0.0928100708 0.0546286410 -0.0583301573 0.0394734755 0.0215704121 -0.0757375616 0.0138361887 0.1044782658 -0.0672267886 0.0766569489 0.0422208512 -0.0933108901 0.0382591634 -0.0107307254 -0.0012720264 -0.0046017518 0.0236018201 -0.0032722291 -0.0511479278 -0.0655818183 -0.0093913028 0.0682786453 -0.0649610262 -0.0229731581 0.0786625412 -0.1143392221 -0.0035337174 0.1172644449 -0.1130227205 -0.0247477052 0.1497696116 0.0507233239 -0.0219569033 -0.0844170123 0.0041892618 -0.0317069330 -0.0190814986 0.1013948597 -0.0262436395 -0.1446973533 0.0174834728 -0.0421924558 -0.0338086422 -0.0545645371 0.0736676412 -0.0081372130 -0.0298937710 0.0411123863 -0.0053137515 -0.0971987833 0.1037534989 0.0443097774 -0.0611047207 0.1121430248 -0.0658270201 -0.0278622553 0.0321412338 -0.0196918387 -0.0460403443 0.0309517257 -0.0152540162 -0.0099139195 0.0280586231 -0.0272313782 -0.0347197522 0.0342227962 -0.0357148655 0.0120695309 0.0079628772 0.0293227635 -0.0115291935 0.0193637320 -0.0307435309 -0.0102693208 0.0187603613 -0.0280727378 -0.0032871952 0.0009886212 -0.0039945627 -0.0109257687 0.0150745903 -0.0055502213 0.0041704009 -0.0075879643 -0.0381702660 -0.0109510228 -0.0024467345 -0.0005455138 -0.0441290686 -0.0177912959 0.0775498807 -0.0239218221 -0.0082071180 0.0194175753 -0.0555528091 -0.0190396875 0.1108663293 0.0386068695 -0.0349222401 -0.0945596214 -0.0181716592 0.0360990889 -0.0442641961 0.0114635654 0.0345513707 -0.0832873982 0.0429196546 0.1099370267 -0.1671048770 -0.0310632104 -0.0042849279 0.0080520312 -0.0900364365 -0.0485164318 0.0693937786 0.1323905630 0.0395405316 -0.0085492390 0.0733970499 0.0344403165 -0.0049305740 -0.0566318690 0.0028808050 0.0232271138 0.0832620653 0.0165772312 0.0717724022 -0.0217714138 0.0514920384 -0.0777955952 -0.0779101432 0.0259075547 -0.0568962597 -0.0010104332 0.0178520038 0.0720733873 0.1475823225 0.0173538260 0.1272518955 -0.0442721303 0.0732117350 -0.1439310322 -0.1393590843 0.0229119162 -0.1044181064 -0.0854522752 -0.0290057214 0.0463840070 -0.0916949589 0.0153725032 0.0129062316 -0.1046435505 0.0386191425 0.0059031691 -0.0766413928 0.0135425352 0.0181876928 0.0013332658 0.0017619587 0.0230806547 -0.0569762062 0.0183021668 0.0442930537 -0.0525844825 0.0003952989 -0.0023620673 -0.0156813671 -0.0056367768 -0.0011130568 -0.0189806015 0.0132120794 0.0463656050 -0.0720675033 0.0253857662 0.0624745786 -0.0615099177 -0.0108377965 -0.0236968393 -0.0008325005 -0.0156327228 -0.0162629301 -0.0051659511 0.0177789577 0.0648578461 0.0324735072 -0.0019494084 0.0234174574 -0.0263933311 0.0337372051 0.0989176187 -0.0243587566 0.0238806357 0.1067827239 -0.0077194088 0.0115211893 0.0045906907 -0.0097092250 0.0158182036 -0.0320618475 -0.0061905877 0.0162831286 -0.0292031221 0.0104424030 0.0017553406 -0.0236885590 0.0098214163 0.0009340583 -0.0079859048 0.0173530310 0.0094222868 -0.0039322712 0.0055790298 -0.0091122928 0.0021608990 -0.0104014621 -0.0429563618 -0.0029794584 -0.0085417735 0.0227653158 -0.0264453782 0.0448561086 -0.0510804797 0.0444350091 0.0250656569 0.0157354120 0.0017129781 0.0097717021 0.0093374232 -0.0007264326 0.0226257888 0.0036335298 -0.0120799871 0.0119375490 0.0139546937 -0.0156627495 0.0028238587 -0.0431835972 -0.0090102347 -0.0010917024 -0.0070397717 0.0377556408 -0.0241531273 -0.0519753523 0.0516924713 -0.0012966072 -0.0321248838 -0.0246270162 -0.0258989282 -0.0885679221 -0.0300093562 -0.0086484127 -0.0587735860 0.1039892673 0.1124213974 -0.0641750832 0.0041221670 0.0719336741 -0.0885384019 0.0790181716 0.0477501480 -0.0369067200 0.0822636222 0.0905492848 -0.1089385666 0.1143260381 0.0908191905 -0.1126954990 0.0969796614 0.0601151261 -0.0713124255 0.0686693777 0.0340413356 -0.0428509726 0.0653183547 0.0302321728 -0.0180063942 0.0678534904 0.1118134600 -0.1329375505 0.1313919822 0.0986210550 -0.1167682183 0.0918593070 0.0290103659 -0.0185411449 -0.0077629663 0.0085072092 -0.0193210926 0.0454781898 0.0024239674 0.0281721931 0.0469882143 -0.0004095904 0.0298649480 -0.0069560228 0.0063760937 0.0379466052 -0.0139387385 0.0029298078 0.0323742340 -0.0120296520 0.0089766633 0.0337977798 -0.0099519397 0.0027084255 0.0251143073 -0.0025505229 -0.0067884590 0.0308164934 -0.0038178921 0.0075021324 0.0405368034 -0.0155899609 -0.0178708999 0.0017529873 -0.0001156439 0.0126430945 0.0326429126 -0.0119143230 0.0001020584 0.0223923821 -0.0012844971 -0.0401959634 -0.0203549968 -0.0266540567 0.0720880473 0.0334208304 -0.0605644204 -0.0344005632 -0.0151101561 0.0063664186 -0.0230100848 -0.0123783221 0.0057165833 -0.0256075827 0.0144491483 -0.0573762890 0.0110972098 0.0044050632 0.0115328924 -0.0611554885 0.0156215637 -0.1132783063 -0.0131188509 0.0019299303 -0.0303881427 -0.1167452143 0.0270100527 -0.2022907476 -0.0323431821 0.0034056099 -0.0608518960 0.0702519586 -0.0088220980 0.1050732821 0.0689806281 -0.0108864302 0.1072856311 0.1226850337 -0.0180866203 0.1736481714 0.1230756228 -0.0192284230 0.1972800881 -0.0312996351 -0.0157377485 0.0371948031 -0.0333926583 -0.0184727531 0.0556774544 -0.0266543220 -0.0307625898 0.0130286037 0.0205186884 -0.0487646706 -0.0599547388 -0.0464489565 -0.0274730892 0.0306454555 0.0409295343 -0.0583088340 -0.1034640628 0.0022870562 -0.0347146723 0.0052840141 0.0397943877 -0.0505714448 -0.0770355380 0.0137992136 -0.0358260710 0.0112584656 0.0808446081 -0.0625685932 -0.1422366130 -0.0087111596 0.0497811477 -0.0530315925 -0.0441035926 0.0848104899 -0.0800546682 0.0436500828 0.0740036537 -0.0553140512 -0.0225911735 0.0243078652 -0.0403534305 0.0080935711 -0.0064367065 -0.0104646889 0.0327900989 -0.0055011163 -0.0149340411 0.0028995679 -0.0110031934 -0.0052661923 0.0020378910 -0.0193180746 0.0022718735 -0.0313351987 0.0457785676 -0.0098737065 -0.0656744626 0.0623860195 -0.1129414573 -0.0594463209 0.0603762660 -0.0915298295 -0.0231083618 0.0292100010 -0.0322467738 -0.0061413802 0.0384491239 0.0175362418 0.0173463712 0.0092874271 -0.0307643466 0.0146168995 0.0137195129 -0.0358942463 0.0231882639 0.0022041761 -0.0205418893 0.0367702764 0.0027870982 -0.0507419642 0.0148657063 0.0017801747 -0.0034924985 -0.0019135202 0.0088323638 0.0096454876 0.0290122256 0.0564565675 0.0552204915 0.0116034156 0.0051927608 0.0267575599 -0.0290959570 0.0104628182 -0.0174749129 0.0523156945 -0.0477820470 0.0499301844 0.0136807874 0.0257730754 0.0180216695 -0.1128194600 0.0456665484 0.0032692429 -0.0602081127 0.0244899730 0.0177410381 0.0392940539 -0.0013045112 0.0232476564 -0.0573425313 0.0269304808 -0.0149725173 0.0160570793 -0.0150899832 0.0688219448 0.0594776344 -0.0193851551 0.0692490139 0.0131795501 -0.0019147936 0.0034531422 -0.1044020821 0.0401314090 -0.0514337002 0.0326334039 -0.0300192331 0.0995981341 0.1038828827 -0.0257202257 0.1002206897 0.0201849927 0.0279978046 -0.0035853312 -0.0025487101 0.0199573408 -0.0386744207 0.0141895617 0.0011592460 -0.0542227443 -0.0124825737 0.0070363272 -0.0397968759 0.0128109726 -0.0095214935 -0.0448894848 -0.0187453868 0.0188024961 -0.0451482180 0.0068879325 -0.0174642318 -0.0428759026 0.0219055283 -0.0252409310 -0.0429175393 -0.0074944508 0.0149879152 -0.0448331651 -0.0312864880 0.0350321480 -0.0486258812 0.0091040378 -0.0301291423 -0.0470597448 0.0366131858 -0.0442883908 -0.0422182630 -0.0129136201 0.0291142528 -0.0425508502 0.0211089718 -0.0164377667 -0.0433325995 0.0460374475 -0.0281155930 0.0127821244 0.0431931803 -0.0414784835 0.0176907982 0.0154246996 -0.0341984736 -0.0391836388 -0.0200357361 0.0105323834 -0.0007956497 -0.0227289789 0.0128076612 0.0029288365 -0.0042926873 -0.0210626761 0.0305193770 -0.0082847407 -0.0166872846 0.0054132601 -0.0202774289 -0.0549364892 -0.0116879190 0.0035340165 0.0324392166 -0.0296766836 0.0046240053 0.0038049713 0.0066858256 -0.0448570630 0.0531679433 -0.0295308914 0.0131713240 -0.0443128710 0.0566760574 -0.0059372035 -0.0490164037 0.0022776268 -0.0454604545 -0.0514920369 -0.0344920693 -0.0101178582 -0.0862466073 -0.0157268587 -0.0178047263 -0.0572747160 0.0394829587 0.0163154705 0.1920138628 0.0229834437 0.0254326237 0.0259759456 -0.1927891568 0.0641145757 -0.0224721225 0.0597337880 0.0123768930 0.0856142199 -0.0128002409 -0.0458522082 -0.0376296871 -0.0188805603 0.1432350900 0.0199325219 0.2585028205 0.0101969339 -0.2889290705 0.0319385453 -0.0659483670 0.0653084952 -0.0593401142 -0.0125508801 0.0156681110 0.0407650553 -0.0066656453 -0.0001123604 0.0496358976 0.0054563417 -0.0294381855 0.0544917678 -0.0064679777 -0.0473399927 0.0560003051 -0.0030949913 -0.0615819477 0.0684670723 -0.0086821631 -0.0299123775 0.0611430894 -0.0165338710 0.0200257161 0.0393167802 0.0158688711 -0.0290882442 0.0455017370 -0.0334782346 -0.0186875718 -0.0053524314 0.0003694246 -0.0788014715 0.0767882300 -0.0176090424 -0.0290014809 0.0691138347 0.0022525783 -0.0777244439 -0.0101952473 -0.0123771003 -0.0982634646 0.0147262781 -0.0148563173 -0.0856586016 0.0158737337 -0.0342023821 -0.0866922368 0.0061674346 -0.0134277724 -0.0630374480 -0.0211719835 0.0148431735 -0.0866906962 -0.0160465608 -0.0101962766 -0.1055490172 0.0221273016 0.0369029803 -0.0038879059 0.0103157341 -0.0490171784 -0.0843545267 0.0139878262 -0.0119062188 -0.0535536879 -0.0290786171 -0.0962034189 -0.0254434246 -0.0228811812 0.0031380140 0.0180868790 -0.0490715143 0.0550696162 0.0469883233 0.0028703503 0.0700965301 0.0314102795 0.0085626485 -0.0551073647 0.0551613164 -0.0898715847 -0.0475660211 0.0489834141 -0.0738708694 -0.0015159817 0.0605488600 -0.0194443053 0.0633828680 0.0633836800 0.1034195660 0.0126662399 0.0570899610 -0.0279733153 0.1251326628 0.0591175039 0.2006996081 -0.0285971487 0.0656970930 -0.0311554551 0.0462958395 0.0671679969 0.0815725433 -0.0527940565 0.0691216410 -0.0496172560 0.0870228262 0.0659807571 0.1529776358 0.0283018016 -0.0013367248 -0.0505309285 0.0109121663 -0.0013406483 0.0015731615 0.0495759008 -0.0182449470 -0.1030675248 0.0324112453 -0.0303036465 -0.0618067290 0.0747461074 -0.0212006518 -0.1601111208 0.0492937372 -0.0440298997 -0.1052341505 -0.0259893272 -0.0111371086 0.0826619171 -0.0203971454 -0.0234677928 0.0573286340 -0.0562474494 -0.0087864324 0.1611508344 -0.0509044997 -0.0290399602 0.1197952409 -0.0311228771 0.0373508293 -0.0111899512 -0.0600737860 0.0727696815 -0.0205982790 0.0099360851 0.0513268228 -0.0179494558 -0.0483614578 0.0066172177 0.0011685783 -0.0172929034 0.0083506730 -0.0007364478 -0.0124348350 -0.0005655177 -0.0096936226 -0.0207392580 0.0168781265 -0.0035912374 -0.0134379095 0.0044824670 0.0113438497 -0.0055771122 -0.0059001030 -0.0154867212 0.0093882495 -0.0108173671 0.0211983001 0.0052626764 -0.0096365398 0.0117695817 0.0019108584 -0.0003530527 -0.0042445274 -0.0041909618 -0.0035153832 -0.0156920786 0.0039037906 0.0100933887 0.0093018065 0.0065693743 0.0043991744 -0.0019942424 0.0169424431 0.0135909592 -0.0184672693 0.0055865018 0.0117125094 0.0105165981 0.0201874502 0.0137801617 -0.0258322921 0.0015728215 0.0184930929 0.0059148639 -0.0075576258 -0.0073171684 -0.0160027595 -0.0031160765 0.0017398789 -0.0111722721 -0.0165781511 -0.0126494748 -0.0024222152 0.0048765907 0.0058417177 -0.0229553852 -0.0049697665 -0.0070608102 0.0048685951 0.0201708739 0.0056263856 -0.0065759018 0.0128752915 0.0043515499 -0.0057012993 -0.0017100680 -0.0010598863 0.0017354618 0.0160504774 -0.0003442477 0.0067894345 -0.0020541282 0.0091518285 -0.0165002028 -0.0071046015 0.0039383600 -0.0124949107 0.0050395721 0.0008890891 0.0064937150 0.0258887616 -0.0003254299 0.0152537410 -0.0082879064 0.0146957409 -0.0266217555 -0.0166053046 0.0030643899 -0.0197506255 -0.0046816106 -0.0094997748 0.0093323699 -0.0036536799 -0.0078311463 0.0119195152 -0.0053956317 -0.0052914575 0.0125058690 -0.0001090850 -0.0081919188 0.0142143020 -0.0058589228 0.0188687001 0.0110737450 -0.0087439506 0.0120785287 0.0157651179 0.0140392867 -0.0270411499 0.0167955394 0.0127867874 -0.0153286646 0.0143624280 -0.0154887175 0.0298557511 0.0115516875 -0.0179298768 0.0208087706 0.0182248922 0.0253945465 -0.0446758103 0.0195802718 0.0235546148 -0.0278038254 0.0126484571 -0.0288957471 0.0518754229 0.0094844368 -0.0118076077 0.0337083204 0.0074141349 0.0014699037 0.0024004914 0.0031693517 0.0037265693 0.0070441984 0.0016471587 0.0025923699 0.0127231137 0.0242957008 0.0011373883 -0.0046250633 -0.0024594392 -0.0119834726 0.0127647559 -0.0209135476 -0.0035401468 0.0034977514 -0.0140383640 -0.0083243636 0.0050189358 -0.0139662858 -0.0142967043 0.0229629923 -0.0058305745 -0.0103463180 -0.0247127276 -0.0073055705 0.0004219726 0.0073973070 -0.0035545154 -0.0388828830 0.0608605954 -0.0517337996 0.0583468621 -0.0623682307 0.0739307933 -0.0330074243 0.0151857445 -0.0237342914 0.0085756429 0.0210337921 0.0078165842 -0.0283362854 0.0491383079 0.0096016310 -0.0173998657 -0.0363743538 -0.0044486012 -0.0259639490 -0.0330637679 -0.0101667192 0.0115874354 -0.0312759155 0.0051081181 0.1696926225 -0.0864777641 0.2329957084 0.0420280448 0.2820973341 -0.1061526979 -0.1948832146 -0.1781857873 -0.1175441475 0.3374053634 0.0634207839 0.4149688007 0.0261775759 -0.5071694649 0.0448191004 -0.1101623477 0.1703637388 -0.1420576436 -0.0057286568 -0.0154363634 -0.0213540917 -0.0048777519 -0.0289936909 -0.0109421379 -0.0033270892 -0.0324092453 -0.0023835910 0.0006562598 -0.0257344487 -0.0023420369 0.0049662293 -0.0224298467 -0.0096792541 -0.0003814388 -0.0169803561 -0.0192770664 -0.0077801901 -0.0350156128 -0.0104281972 -0.0060350568 -0.0348651495 0.0017605604 -0.0038561510 -0.0008243537 0.0077894586 0.0093268270 -0.0195814309 -0.0087131643 0.0000688178 -0.0116410727 -0.0250048936 0.0009560240 0.0165835415 0.0207617588 -0.0016852780 0.0131733528 0.0153546343 0.0016624571 0.0044943509 0.0143300872 0.0051457171 0.0010607680 0.0200902270 0.0051890909 0.0060583534 0.0248787056 0.0016598109 0.0240040147 0.0198928090 -0.0044469261 0.0169071707 0.0106420819 0.0010215666 -0.0041759240 -0.0050486896 0.0069412580 -0.0043595001 0.0199309192 0.0086618198 0.0038352065 0.0289987669 0.0048402615 0.0141452046 0.0097408805 -0.0169058002 0.0117686985 0.0146055308 0.0166128270 -0.0167698557 -0.0110969549 -0.0149815462 -0.0000137888 -0.0169893328 0.0081299071 -0.0105120155 0.0192502999 0.0021719607 -0.0080406134 0.0011426262 0.0059893330 -0.0179190709 0.0285158078 -0.0104404862 -0.0223545578 -0.0050909102 0.0111773851 -0.0186698325 0.0533023734 -0.0157600062 -0.0258065087 -0.0075460273 -0.0092460257 -0.0154363000 -0.0230792449 -0.0221402277 -0.0210348968 -0.0353508901 -0.0113643441 -0.0151278571 -0.0370329881 -0.0371265676 -0.0237013891 -0.0637242503 0.0116669993 0.0114427209 -0.0090808360 0.0185782548 0.0127222605 -0.0251960754 0.0035272769 0.0219083507 0.0156495939 -0.0122637254 0.0314091595 0.0382707934 0.0050935306 0.0213006237 0.0227268583 -0.0269723870 0.0374475440 0.0685481556 0.0135944633 0.0211693922 -0.0246115884 -0.0044536183 0.0301148163 0.0164220171 0.0162355040 0.0210482723 -0.0457725991 -0.0138379256 0.0351390814 0.0291121777 0.0174177409 -0.0085634393 -0.0090141136 0.0256938751 -0.0246282598 -0.0165357009 0.0068775239 -0.0116094478 -0.0066805169 0.0302537687 0.0061246553 -0.0091355095 0.0095199056 -0.0088918038 0.0180010536 0.0223175950 0.0085991217 0.0318892263 0.0069628385 -0.0299463748 0.0312938751 0.0057163067 -0.0066085974 0.0081937318 -0.0239739715 0.0028425951 -0.0387734209 -0.0048221241 0.0009696951 -0.0065745440 -0.0166449089 0.0040775839 -0.0256018642 -0.0103610764 0.0147011384 -0.0384490226 -0.0188500728 0.0093062352 -0.0423290338 0.0127040305 0.0333160192 0.0137174849 0.0248672540 0.0194750782 -0.0320774439 0.0616562532 0.0406315458 -0.0670011929 0.0382000313 0.0336273228 0.0011935702 0.0650225857 0.0410826077 -0.0799051250 -0.0119574745 0.0661525420 0.0330379702 -0.0186085220 0.0004736033 -0.0252846111 -0.0240123674 0.0073446177 -0.0141401885 -0.0803971902 -0.0360780111 -0.0004359848 0.0165002440 0.0079731233 -0.0520080464 -0.0228122150 -0.0086984818 -0.0042018828 0.0862687668 -0.0364950232 0.0148371026 0.0436748842 -0.0142019483 -0.0003687716 -0.0334681952 0.0171265188 -0.0141685246 0.0557523999 -0.0278750609 0.0281174268 -0.0331478584 0.0366942309 -0.0492667766 -0.0619051533 0.0418007421 -0.0511850425 -0.0053573224 0.0066689286 0.0048447286 0.1039677978 -0.0527849603 0.0620033261 -0.0599513507 0.0594817441 -0.0768166618 -0.1044014601 0.0575437473 -0.0788185149 -0.0266870378 -0.0013597675 0.0018071536 -0.0209550711 0.0037116461 0.0129952848 -0.0274257030 0.0130011464 0.0156458986 -0.0162097548 -0.0003962821 0.0169051608 0.0080235497 0.0001581708 0.0201046348 0.0017012344 -0.0158451928 0.0315502618 -0.0272565267 0.0199518421 0.0054368504 -0.0169645744 0.0241224333 0.0045246778 0.0182275776 -0.0202774322 0.0333676072 0.0090624404 -0.0311888749 0.0442967128 -0.0421091242 0.0366635290 -0.0023273308 -0.0259394092 0.0427105505 -0.0089559662 0.0377736823 -0.0394951227 0.0441604846 0.0188527626 -0.0015610388 0.0204391678 -0.0321426731 0.0280264541 -0.0085598757 -0.0129660175 0.0284922653 -0.0134014124 0.0232999254 0.0173986722 0.0464661528 -0.0039604933 0.0048257075 -0.0041404063 0.0041426820 -0.0060803796 0.0047801506 -0.0047125806 0.0071679900 -0.0064073139 0.0161191596 0.0012901307 -0.0005820925 0.0447961731 0.0122541584 0.0007333894 0.0214162462 0.0461989223 -0.0171939546 0.0042143309 -0.0404847609 0.0099865157 0.0238519900 -0.0428730278 0.0245552154 -0.0420172835 0.0276105829 -0.0559999516 0.0699153668 0.0215110794 0.0246997326 0.0380640271 0.0120883087 0.0105221027 0.0623590089 0.0095815382 -0.0353328756 0.0147769991 -0.0006087750 0.0257474549 0.0374181884 0.1501693728 0.0168957999 0.0173078444 0.0475438633 -0.1257942002 -0.1112947361 0.0088879041 -0.0866401369 -0.0198948418 -0.2027184455 0.0695291110 0.1268220315 0.0291181499 0.0542514215 -0.2575608272 -0.0657031196 -0.2905234824 -0.0092173179 0.3472468081 -0.0405101766 0.0876503140 -0.1514471266 0.1027521891 -0.0045181469 -0.0463330927 -0.0051864199 0.0089654140 -0.1087271347 0.0378688389 0.0153268928 -0.1222850994 0.0553572774 0.0118488683 -0.0969720492 0.0467320696 0.0188191147 -0.0858663957 0.0305850026 0.0049744729 -0.0587142857 0.0034527390 0.0021733006 -0.1269834775 0.0405819212 0.0106773599 -0.1237287843 0.0587809118 -0.0212755055 -0.0084307475 0.0185294956 0.0244601307 -0.0724535540 0.0289637271 -0.0055950019 -0.0299005682 -0.0155122165 0.0141605317 0.0025550170 0.0546054630 -0.0021858294 -0.0208728137 0.0546421201 0.0060062035 -0.0421443055 0.0530989460 0.0056498503 -0.0483337060 0.0606667496 0.0185079040 -0.0179970443 0.0569783174 0.0247475404 0.0168552321 0.0481668625 -0.0103559437 -0.0155358432 0.0454656039 0.0296505757 -0.0303584397 -0.0016241161 0.0010048140 -0.0613895250 0.0653471799 0.0319789190 -0.0179197840 0.0647578698 -0.0566677674 0.0359738494 0.0071376623 -0.0168654989 0.0412580622 -0.0016295332 0.0825805694 -0.0399835880 -0.0222866307 -0.0012114360 -0.0050098523 -0.0348203715 -0.0143147885 0.0012066371 -0.0181773600 -0.0198869266 0.0032637344 -0.0442392073 0.0022318982 -0.0166668939 0.0357477059 0.0083477783 -0.0326546637 0.0370937348 0.0104564350 -0.0177736414 0.0790925267 0.0261038283 -0.0451772315 0.0825924070 -0.0248466405 -0.0136153390 -0.0639014967 -0.0144239695 -0.0300578353 -0.0264767935 -0.0314777731 -0.0132914061 -0.0998205335 -0.0174490158 -0.0403845504 -0.0389389935 0.0520164429 0.0331842222 -0.0662764868 0.0576463303 0.0371687485 -0.0728109679 0.0499459548 0.0576136094 -0.0338830858 -0.0102299562 0.0818315898 0.0609220600 0.0790203168 0.0531822807 -0.0520082054 -0.0378539612 0.0917141009 0.1159871742 0.0124734182 0.0612579763 -0.0120710000 -0.0316258091 0.0835694448 0.0876968875 -0.0096131194 0.0633179136 -0.0156340794 -0.0834850350 0.0974349140 0.1712593285 -0.0134851414 0.0132926479 -0.0043097808 0.0144666736 -0.0232776159 -0.0001723589 -0.0568731341 0.0223387014 0.0268990413 -0.0069252991 0.0510673775 -0.0411912959 -0.0062506420 0.0043705894 -0.0101049262 -0.0101339519 -0.0019673088 -0.0154888866 -0.0046790048 0.0115321798 -0.0148878361 -0.0059822674 0.0025839212 -0.0067898074 0.0034464338 0.0002175492 0.0044958026 0.0020526461 -0.0005469652 0.0061290117 0.0028667716 -0.0007364645 0.0055107713 0.0001258071 -0.0012188876 0.0028273652 -0.0003426978 0.0000852950 0.0006614694 -0.0039127530 -0.0034874875 -0.0005990439 -0.0044456924 -0.0020181188 0.0022776207 -0.0087173411 -0.0033820743 0.0073723200 -0.0052567385 -0.0043952508 0.0011008705 -0.0104352926 -0.0033450141 0.0088298233 -0.0036795030 -0.0025943065 -0.0025928064 -0.0035762755 -0.0004027478 -0.0034801908 -0.0036920655 0.0007634723 -0.0017704324 -0.0025860898 -0.0007726962 0.0019288781 -0.0082153910 0.0057958829 -0.0029267359 0.0016820947 0.0077469017 -0.0012130307 -0.0132874443 0.0069277361 -0.0031169868 -0.0061033865 0.0037489801 -0.0009567438 0.0074231696 0.0007132628 0.0010984008 -0.0025312763 0.0007409105 -0.0025315569 0.0008559230 0.0014290912 0.0041362385 0.0078998748 -0.0000825382 0.0046334288 0.0066283777 -0.0017937590 -0.0006094304 -0.0061245323 0.0008143042 -0.0056005821 0.0000801265 0.0019069614 0.0069687956 0.0115788105 -0.0003195107 0.0072524409 0.0030763535 0.0036217556 -0.0006353058 0.0030150517 -0.0102067251 0.0049856137 0.0032352680 -0.0069004902 -0.0013743021 -0.0014882322 -0.0080325152 0.0032877451 0.0098543456 -0.0144950664 0.0044184444 -0.0051926682 -0.0009785606 0.0033124650 0.0049894158 -0.0163439035 0.0038012720 0.0086764499 -0.0142202634 0.0029435048 0.0031186108 -0.0067142119 0.0047313948 -0.0115406246 0.0068772667 0.0029130817 0.0104085139 -0.0301517219 0.0024933795 0.0111805847 -0.0171891335 0.0015469580 0.0030759054 -0.0042148706 0.0061634930 0.0145606107 -0.0187422731 0.0054163830 0.0140914242 -0.0085580953 -0.0024570421 0.0051042254 -0.0006112275 -0.0028918796 -0.0046346301 -0.0061140187 -0.0025626707 -0.0099408836 0.0065032194 0.0039246168 -0.0150389417 -0.0057949326 0.0033268278 -0.0413889946 0.0324584961 -0.0265422557 0.0112245173 0.0183761853 -0.0123864085 0.0708554220 0.0651085571 0.0008243012 0.0277734786 0.0657501978 -0.0491316669 -0.0096999794 -0.0507607796 0.0077331954 0.0103384407 -0.0514008930 0.0402457863 -0.0265660985 0.0104185614 -0.0130844435 0.1411316355 0.1357103851 0.0470904440 0.0084517219 0.0658261923 0.0496239734 0.1204390972 0.0297809924 -0.0858571780 -0.0406173085 -0.2051204526 0.1529705908 0.0176066111 0.4898601207 0.0891205598 0.1397717071 0.0332719986 -0.4747095805 0.1008531767 -0.1415775419 0.2921901964 0.0356737646 0.1795034103 -0.1028606086 -0.1819818866 -0.2812662762 -0.1316205791 -0.0115900606 0.0064288007 -0.0764995896 -0.0631598893 0.0542573404 0.0128220184 -0.0313881044 0.0168609613 -0.0123313647 0.0026897111 0.0055905140 0.0018548339 0.0032921867 0.0102016967 -0.0021067617 0.0025815381 0.0122949591 -0.0045421663 0.0024888731 0.0122104380 -0.0049147293 0.0000983172 0.0127393002 -0.0035022636 0.0014884783 0.0096677917 -0.0002612768 0.0054667674 0.0106735295 -0.0012886529 0.0031828667 0.0115464862 -0.0041737483 0.0059927331 0.0031429026 -0.0033871672 -0.0021159812 0.0130230764 -0.0047229639 0.0021001114 0.0082934794 0.0004858980 -0.0091869352 -0.0134609834 0.0012540646 -0.0066641564 -0.0114452966 0.0001510944 -0.0046790227 -0.0083195785 -0.0014161444 0.0002175545 -0.0006111955 -0.0060045091 0.0020004673 0.0014753131 -0.0070541884 -0.0133607414 -0.0195143705 0.0038197326 -0.0064026487 -0.0131837794 0.0019434737 -0.0092696924 -0.0156420108 0.0077635152 0.0025191267 0.0027061369 -0.0076470290 0.0074624086 0.0081484759 -0.0105901039 0.0085723773 -0.0009832765 -0.0026250168 0.0070579273 -0.0028007304 -0.0022409488 -0.0214275554 -0.0193657826 0.0130185549 -0.0056250707 -0.0191403845 0.0133763155 0.0015607496 -0.0007955662 0.0029770070 0.0028380980 -0.0011536093 0.0064391258 -0.0033384328 0.0002786222 -0.0060083433 -0.0041776651 0.0007361980 -0.0071583425 -0.0069177061 0.0010057299 -0.0126289705 -0.0086482880 0.0018682968 -0.0154629155 0.0051128841 -0.0011349789 0.0104709645 0.0017792451 -0.0001795050 0.0042597810 0.0086689192 -0.0017168346 0.0161433377 0.0029390742 0.0001848674 0.0065692218 -0.0074058063 -0.0023100579 0.0058122889 -0.0080818244 -0.0026881210 0.0069274197 -0.0069678247 -0.0039425028 0.0030285758 -0.0008330350 -0.0056909017 -0.0072767063 -0.0095055452 -0.0034958182 0.0058989061 0.0021114940 -0.0063411805 -0.0126458306 -0.0037193632 -0.0042069120 -0.0000573775 0.0013697162 -0.0059058723 -0.0106950721 -0.0022836638 -0.0043540348 -0.0000503446 0.0068338337 -0.0070607405 -0.0198182692 0.0117213776 -0.0050221245 -0.0005732649 -0.0247581155 0.0387657214 -0.0140586857 0.0714938295 -0.0129208046 -0.0393564003 0.0065488548 -0.0487844537 0.0463029549 -0.0141305961 0.0216437310 0.0208901287 -0.0153287128 0.0447027045 0.0430346172 -0.0160397998 -0.0016343437 0.0351100699 -0.0113830250 0.0328265878 0.0039094949 -0.0062543316 -0.0001349804 -0.0175578223 0.0026816948 -0.0049271047 0.0151808638 0.0051569961 -0.0054072019 0.0121814053 0.0041878270 -0.0040640427 0.0054968201 -0.0028126669 0.0002355333 -0.0056553249 0.0046035198 -0.0040595592 -0.0030230499 0.0030952628 -0.0024401916 0.0044236853 -0.0047663025 -0.0013632082 0.0047944989 -0.0090995616 -0.0030322311 0.0154959859 -0.0074285797 -0.0012075513 0.0059573736 0.0160840396 -0.0133285928 -0.0209059719 -0.0004590827 0.0076398755 -0.0087232736 0.0086943853 0.0034911926 -0.0209728224 0.0028565276 0.0253415976 -0.0592021734 0.0072880641 -0.0200390055 0.0111772063 -0.0171587335 -0.0051058908 0.0591171278 -0.0647879974 0.0931732264 -0.0277953893 -0.0256831168 0.0528779773 -0.0002317059 0.0361843492 -0.0157961104 0.0435361439 -0.0260539988 0.0511846070 0.0054563057 0.0334976924 -0.0063746245 0.0320745014 0.0593221651 -0.0341737359 0.0497183686 0.0260339771 0.0028021847 0.0390493791 -0.0595446852 0.0852806272 -0.0130166261 0.0493919008 -0.0190240949 0.0343128855 0.0874496862 -0.0570436405 0.0645315966 -0.0041323602 -0.0115126902 0.0373597678 -0.0301015918 -0.0032780975 -0.0114261106 -0.0183610456 -0.0116966879 -0.0324711489 -0.0468820222 -0.0006474764 -0.0143036879 0.0227758589 -0.0189836032 -0.0169416525 -0.0387246324 0.0090363717 -0.0019909032 -0.0273843812 -0.0138773100 -0.0339000904 0.0078627752 -0.0195839918 -0.0349065384 -0.0015792190 0.0003770302 0.0004574582 -0.0535823884 0.0196878653 0.0093256518 -0.0345806021 -0.0297834209 -0.0529634307 0.0225428669 -0.0308884055 -0.0485164214 0.0097990589 0.0064371486 0.0170180700 0.0525078921 -0.0314115553 -0.0143846417 0.0583196332 -0.0285992294 0.0547630339 0.0412839116 -0.0249252254 0.0611258474 -0.0081129287 0.0035839972 0.0241710927 -0.0050397572 -0.0099865992 -0.0158563601 -0.0082980687 0.0216386948 -0.0272965990 -0.0043926052 0.0079111405 -0.0127230864 -0.0024046720 0.0087566258 0.0375121261 -0.0009939451 -0.0106824390 0.0302356400 0.0020308638 0.0580273379 0.0285693734 0.0183890257 0.0734457998 0.0196537772 -0.0233850613 0.0445273742 -0.0588683806 0.0121755521 -0.0644850606 0.0110022241 -0.0272611342 -0.0612147461 0.0235079072 0.0457394181 -0.0123854698 0.0048043253 -0.0194031442 0.0195443662 0.0529040807 -0.0412687524 -0.1544679858 0.2022038763 -0.0283823571 0.3952844386 0.1381928085 0.0858953075 0.0338470030 -0.3015207533 -0.0884695137 0.1643544769 -0.2685018915 -0.0304883791 -0.1618388260 0.1388090045 0.2016505444 0.3056199640 0.1604660975 -0.1317280615 -0.1020370412 0.0401059841 0.1017691725 -0.0034830249 -0.0340208987 0.0926179406 -0.1752104136 0.0789373330 -0.0078132739 -0.0088369198 -0.0359477331 -0.0148879662 0.0027376962 -0.0420974289 -0.0096298045 -0.0078649057 -0.0292802942 0.0030608239 -0.0195363700 -0.0188910525 0.0154406909 -0.0370177773 -0.0141355920 0.0105927930 -0.0344394387 -0.0211565498 -0.0246520863 0.0172413806 -0.0509791904 -0.0127144762 -0.0075265042 -0.0261039841 0.0017047781 0.0046938095 -0.0004897033 0.0259892441 -0.0521835936 -0.0041207397 0.0224749805 -0.0502636498 -0.0155713988 -0.0087528298 0.0092063208 0.0201838193 -0.0025273573 0.0180001400 0.0108640526 0.0027151720 0.0176556582 0.0070843556 0.0095009417 0.0187053807 0.0103120381 0.0030428293 0.0131774902 0.0182669711 -0.0146180620 0.0083140756 0.0233477085 -0.0018567267 0.0215925277 0.0083687457 -0.0074307499 -0.0033910727 -0.0029123473 0.0156117277 0.0202914678 0.0069690723 0.0063402881 0.0140279223 0.0192170345 0.0188243307 0.0232987979 0.0035834571 -0.0186420073 0.0135661735 0.0136031702 -0.0031492881 -0.0198087687 -0.0040181369 -0.0253031954 -0.0098824911 -0.0081135859 0.0122668524 -0.0100431722 0.0267743799 0.0054830248 -0.0082875773 0.0109317396 0.0104414826 -0.0149017534 0.0325032781 -0.0113948759 -0.0146001323 -0.0081352766 0.0185464060 -0.0163411132 0.0563825738 -0.0181777244 -0.0154678096 -0.0167637938 -0.0098431374 -0.0102801314 -0.0165600023 -0.0260349793 -0.0124068517 -0.0382650159 -0.0148099216 -0.0092225084 -0.0279488593 -0.0455854126 -0.0124543036 -0.0729041308 -0.0022486169 0.0013010005 0.0109300182 0.0032367103 0.0014152539 -0.0078073548 -0.0135116932 0.0072096465 0.0349518628 -0.0136960462 0.0127169192 0.0310361258 -0.0218635887 0.0079289056 0.0518207867 -0.0239634352 0.0185193372 0.0541775765 0.0139692134 0.0055526650 -0.0326186853 0.0058624911 0.0103327146 -0.0129166815 0.0257117345 0.0046354595 -0.0624442661 0.0130293031 0.0126533440 -0.0285443535 -0.0148543672 -0.0277406856 -0.0018777952 -0.0541910568 0.0332806032 0.0091031115 0.0416373420 -0.0427585631 -0.0457820337 -0.0356205303 -0.0900519005 0.0456168868 -0.0022762421 -0.0261722999 -0.0396037783 -0.0011571931 -0.0564006306 -0.0692359038 -0.0046582134 0.0092218694 -0.0577653506 0.0005709430 -0.0403877899 -0.0091958034 0.0061073034 0.0030016982 0.0133310865 -0.0009210910 0.0043577168 -0.0017264178 -0.0010785990 0.0043449329 -0.0012988653 -0.0023435045 0.0023558205 0.0000632068 0.0005061597 0.0024464118 0.0039122968 -0.0069911887 -0.0012825601 0.0026968671 -0.0052322722 -0.0001222672 -0.0006692370 -0.0032019889 -0.0023434604 0.0012948140 0.0020607637 -0.0031314878 -0.0086580492 -0.0034682023 -0.0022965221 0.0006263492 -0.0154973984 0.0067286673 0.0131823994 -0.0039581703 -0.0025828976 0.0025599124 -0.0127053625 -0.0009927180 0.0119660547 -0.0107068497 -0.0166841460 0.0380988593 -0.0151882318 0.0157206618 -0.0067392044 0.0150119670 -0.0260112301 -0.0354637449 0.0755114798 -0.0690070839 0.0105555644 0.0344612501 -0.0412911331 -0.0083754579 -0.0356562516 -0.0021187122 -0.0291442644 0.0264134953 -0.0347108892 -0.0013236817 -0.0196761994 -0.0026615508 -0.0420357593 -0.0519621321 0.0119411122 -0.0495529650 -0.0279785471 -0.0036496399 -0.0225950574 0.0564617802 -0.0510097663 0.0195831543 -0.0293184090 0.0056579598 -0.0548655743 -0.0801007068 0.0225057639 -0.0675698400 0.0025785256 -0.0168643064 -0.0147537256 0.0274757291 0.0014819643 0.0175226654 0.0140360689 0.0125724795 0.0401047753 0.0386482744 0.0010750502 0.0199598384 -0.0149513440 -0.0008438728 0.0267141136 0.0128598587 0.0177471202 0.0008938640 0.0421547371 -0.0190966107 0.0470667110 0.0158054020 -0.0217979054 0.0501912748 -0.0179097172 0.0182250216 0.0006930417 0.0078014488 0.0332329063 -0.0171141973 0.0600643348 -0.0273730172 0.0640701340 0.0174266991 -0.0350353426 0.0698713930 -0.0450196277 0.0345694334 -0.0204731930 -0.0380662211 0.0015175755 0.0265683660 -0.0645736960 0.0299828522 -0.0296542128 -0.0472115831 0.0230148540 -0.0340982653 0.0014773959 -0.0103166293 -0.0159623844 0.0155636064 -0.0112894076 -0.0145248181 0.0216053932 0.0104175563 -0.0222267762 0.0109245078 0.0097408174 -0.0128983719 0.0002735535 0.0159233649 0.0246857313 -0.0037769421 0.0218062165 0.0282892409 0.0020648498 0.0627104186 0.0211309852 0.0170795849 0.0749727675 0.0070357006 0.0106528298 0.0193242011 -0.0642315203 0.0161692334 -0.0737441869 -0.0261117536 -0.0525453964 -0.0363069743 -0.0006450296 0.0736965129 0.0173354848 0.0264184517 -0.0388622646 0.0905981877 0.0651718277 -0.0273259537 -0.0950077843 0.1546475092 -0.0204246933 0.3161955711 0.1036633466 0.0589922178 0.0461517317 -0.2273373067 -0.0144236999 0.1211109434 -0.1626137804 -0.0085324645 -0.0308378500 0.0691158914 0.1004559175 0.2149767634 0.0910870933 0.0440659124 -0.0505125359 0.0863888944 0.0074119113 -0.1893495349 -0.0334210165 -0.0007842162 -0.0497821421 -0.1010166483 0.0068204870 0.0129970532 0.0204579513 0.0143279902 0.0057291804 0.0224941666 0.0109380809 0.0130805584 0.0127691211 0.0033868960 0.0218635086 0.0055659586 -0.0088658109 0.0376133205 0.0014829629 -0.0063867036 0.0362470800 0.0074236901 0.0237263090 -0.0045144553 0.0298547894 0.0127464485 0.0118818668 0.0117584543 0.0088770617 -0.0022215938 -0.0012861461 -0.0184648781 0.0483434665 -0.0067832722 -0.0147544722 0.0485162494 0.0021962605 -0.0017668246 -0.0216568155 -0.0090139577 -0.0024719772 -0.0241595497 -0.0043728233 -0.0026324428 -0.0198892951 -0.0042603376 -0.0049013613 -0.0156567429 -0.0097734780 -0.0000797748 -0.0110780451 -0.0156856465 -0.0014715168 -0.0274423334 -0.0087986723 -0.0018173085 -0.0269047528 -0.0017222646 0.0036094121 -0.0078479240 0.0069412050 -0.0078956868 -0.0134411462 -0.0084733763 0.0022561712 -0.0065899963 -0.0187572809 0.0045132357 -0.0182572391 -0.0018583597 0.0203915084 -0.0132972001 -0.0070194246 -0.0045335373 0.0054317460 0.0106349072 0.0165345342 -0.0074006006 0.0152867998 -0.0061085192 0.0059895096 -0.0115110125 -0.0009074291 0.0044741070 0.0002790143 -0.0101486779 0.0090549478 -0.0226526952 0.0013555061 0.0086855139 -0.0011872761 -0.0185041076 0.0106605060 -0.0416646802 0.0008100152 0.0098549042 -0.0037826796 0.0096377609 0.0050088781 0.0187519218 0.0152998032 0.0065456471 0.0255437209 0.0159686875 0.0037530778 0.0294450174 0.0272655496 0.0064587486 0.0466783236 -0.0035782438 -0.0023476598 -0.0030966715 -0.0076095257 -0.0027930036 0.0093606532 0.0039930279 -0.0069108969 -0.0200016697 0.0080049790 -0.0112388199 -0.0243643147 0.0078782117 -0.0070707785 -0.0283017252 0.0165361018 -0.0151522277 -0.0424487090 -0.0119189582 -0.0059409329 0.0206882434 -0.0033158029 -0.0098166401 0.0013211410 -0.0188445970 -0.0054224778 0.0396164243 -0.0044697190 -0.0118456598 0.0054156786 -0.0110313218 -0.0735873004 0.0347807837 0.2112275783 -0.3403255762 0.1173116843 -0.3508762480 -0.1087896406 0.1732460991 0.0728608359 0.1698585309 -0.1491651170 -0.0028883889 -0.0078977908 -0.0712329602 -0.0300732432 -0.0533594214 -0.1101237470 -0.0023387452 0.0475627628 -0.1017240166 0.0054592316 -0.0153595656 -0.0418769213 0.0056015156 0.0042174874 0.0055703128 0.0066991473 -0.0050142069 0.0528969335 0.0064604526 -0.0049351556 0.0365828511 -0.0164705012 0.0071317129 0.0192637220 -0.0313445908 0.0088696303 -0.0180686127 -0.0266986054 0.0119204850 0.0319824950 -0.0265002340 0.0053473612 0.0220204775 0.0043603733 0.0103988345 -0.0005703161 0.0163906746 0.0079411688 -0.0188103107 0.0137042858 0.0107298272 -0.0191883299 -0.0561376077 0.0613425428 0.0462724569 -0.0702312244 -0.0183723979 -0.0382260020 -0.0739306384 0.0113071984 -0.0069885501 -0.1315920476 -0.0650588130 0.0543741107 -0.0475190031 0.0617560065 -0.0890727076 -0.0102743612 0.0572288112 -0.0107777809 -0.0214500163 0.0195872551 -0.0095069637 -0.0032999674 0.0157676774 -0.0069587019 0.0322398633 0.0252670516 -0.0010604933 0.0118664946 0.0008231593 -0.0080667337 0.0072749007 0.0249005353 0.0038314684 0.0311282136 0.0248697499 0.0014094867 0.0354778951 0.0068089106 -0.0107518363 0.0104659086 -0.0065459530 -0.0115717376 -0.0029528837 0.0324254107 0.0144512521 0.0374166073 0.0280328457 0.0066908185 0.0010963833 0.0191950624 0.0065862668 -0.0104157511 -0.0145583598 0.0172721729 0.0011089171 -0.0332490089 0.0157491975 -0.0145117421 -0.0162188750 0.0246688320 0.0188962494 0.0265952279 0.0246428970 -0.0047027207 -0.0007133824 0.0471548318 -0.0085289627 -0.0171538521 0.0126034644 0.0121915109 0.0046655448 0.0064719072 0.0122087366 0.0225359193 0.0433115042 -0.0127561233 -0.0050992577 0.0701854362 -0.0117592986 -0.0239364027 0.0073691152 0.0231066447 0.0048994317 -0.0182423501 0.0166746304 0.0359397577 0.0565196873 0.0288849310 0.0428944483 0.0204077790 0.0665133470 -0.0214031618 -0.0468820411 0.0371077271 0.0257883848 -0.0547756095 0.0177734864 -0.0138582712 -0.0486199099 -0.0093979395 -0.0205027664 0.0211836084 -0.0382338890 0.0179502007 -0.0194159819 -0.0053130879 -0.0040207603 -0.0102156064 0.0062042932 -0.0092667836 -0.0149553296 0.0365826526 0.0197217664 -0.0069022505 0.0128266182 0.0015631410 -0.0369506696 -0.0049870032 -0.0542693249 -0.0021967544 -0.0842120970 0.1016710376 -0.0668411091 0.0085335467 -0.0288800406 0.0589511076 0.0793659003 0.0606864841 0.0223137243 0.0048775140 0.0200222699 0.0235415817 0.0662095301 0.0051956593 -0.0623185707 0.0167364872 0.0504188033 -0.0850014907 0.0502634944 -0.0607886719 -0.0567334232 -0.0207458094 0.0113427744 0.0144771008 -0.1721830101 0.0219314837 -0.1630172415 -0.0410972668 -0.2926729699 0.0866171072 0.1743928847 0.0643491370 0.0722506343 -0.1498762259 -0.0663669282 0.1235990134 0.1537550745 0.0186873457 -0.0192666418 0.0923318683 -0.1447344098 0.1664110501 0.0187171202 0.0085484410 -0.0055815886 0.0383703585 0.0055093701 -0.0140729022 0.0407898400 0.0074283103 -0.0183439841 0.0473338610 0.0215178387 -0.0223799976 0.0302911977 0.0309640104 -0.0186274130 0.0276038706 0.0265399899 -0.0116701976 0.0522098722 0.0060374167 -0.0080143647 0.0383237863 0.0020492072 -0.0106731251 0.0593119681 0.0179097955 -0.0162911089 0.0169093901 0.0334657805 -0.0264101686 0.0314201238 0.0304222140 -0.0197469905 0.0119236568 -0.0388661227 -0.0347255973 -0.0011161746 -0.0624424000 -0.0177917756 -0.0061818617 -0.0648242449 -0.0117072067 -0.0168968008 -0.0607285462 -0.0224793465 0.0033049088 -0.0373897254 -0.0404003861 0.0219362134 -0.0399383381 -0.0400527579 -0.0047038121 -0.0689474786 -0.0149324038 0.0217100815 -0.0140304147 0.0150999500 -0.0294777995 -0.0644177543 -0.0155508757 0.0075276075 -0.0325091805 -0.0426512007 0.0722941783 0.0173282614 -0.0128500660 0.0554152659 0.0141587210 -0.0112764417 0.0078770216 0.0306940107 0.0204771187 0.0669902069 -0.0005669475 0.0328989770 -0.0035833348 -0.0040384532 0.0307911500 0.0020962168 -0.0049617980 0.0487873385 -0.0457647782 -0.0114443610 -0.0165214915 -0.0517852074 -0.0236259892 -0.0322423948 -0.0813509746 -0.0035435701 -0.0468752965 -0.0858047068 -0.0227257249 -0.0833812983 0.0188906958 -0.0245620757 0.0667977135 -0.0110799582 -0.0309576555 0.0311431426 0.0523512458 -0.0313735948 0.0883110378 -0.0049912319 -0.0358822498 0.0385731458 -0.0161964826 0.0055027942 0.0093955584 -0.0175371229 0.0052124479 0.0323752914 0.0091067934 -0.0005581977 -0.0363378806 0.0252205772 -0.0091277409 -0.0585921772 0.0214203241 -0.0012761892 -0.0531511370 0.0506267625 -0.0189818836 -0.1101166947 -0.0274241087 0.0005286712 0.0557004220 -0.0020169553 -0.0061105130 0.0042340023 -0.0463102447 0.0019907816 0.0975033533 -0.0020709834 -0.0104475113 0.0084052307 0.0353642778 -0.0084358578 -0.0088645411 -0.1322459007 0.1945381441 -0.0669802074 0.2945621992 -0.0073516819 -0.1403759511 -0.0147926022 -0.1996342305 0.1593010866 0.0130699098 -0.0301900991 0.0805584350 0.0332902900 0.0602285432 0.1635378923 0.0384406831 -0.1380238743 0.1272557597 -0.0182806674 -0.0115871867 -0.0047029852 -0.0006796927 -0.0024757316 0.0000847282 -0.0021143334 0.0007491268 -0.0193057652 -0.0016137612 0.0005864187 -0.0114092205 0.0076128816 -0.0023580122 -0.0040512372 0.0141660178 -0.0050133332 0.0091693819 0.0094189255 -0.0018310754 -0.0087071211 0.0084644086 -0.0006627498 -0.0041494088 -0.0002819517 -0.0022718874 0.0020284498 -0.0039327024 0.0004195980 0.0041172824 -0.0011224248 -0.0024844611 0.0073548351 0.0193917123 -0.0188959063 -0.0119717800 0.0277507283 0.0025639526 0.0164263296 0.0283716575 -0.0063352650 0.0075334032 0.0525655441 0.0148828488 -0.0024794922 0.0197968343 -0.0194566712 0.0288527982 0.0148352819 -0.0269133269 -0.0189952729 -0.0025224256 -0.0078901843 -0.0296650962 -0.0018020695 -0.0144270077 -0.0251559203 -0.0063995797 -0.0266426400 -0.0133100166 -0.0160753339 -0.0020329549 -0.0262174855 0.0154335037 -0.0357836018 -0.0166787490 0.0063388825 -0.0372130059 -0.0133916009 -0.0113853677 -0.0175813746 -0.0145038971 -0.0257515051 0.0129425419 -0.0299903140 0.0300404218 -0.0474966275 -0.0147568259 0.0115731550 -0.0481057479 -0.0121633732 0.0082478331 -0.0197042441 -0.0136785981 0.0239175019 -0.0166227740 0.0097857103 0.0181461305 -0.0135179151 0.0228449129 0.0342309830 -0.0026676826 0.0051506079 -0.0141848302 -0.0004531312 0.0078752871 0.0228198893 -0.0033115128 -0.0078166152 0.0271924152 -0.0007695780 0.0209065860 0.0008949012 -0.0026973767 0.0233955851 -0.0039013590 -0.0026478625 -0.0084593887 0.0303864379 -0.0060065717 -0.0194660614 0.0375466507 0.0049508369 0.0359383787 -0.0053858766 -0.0034398223 0.0393544416 -0.0162394652 -0.0030762132 -0.0228461300 -0.0327560871 0.0022788024 0.0074811648 -0.0077965343 -0.0202428218 0.0043294671 -0.0099182578 -0.0272737639 0.0068299054 -0.0041104793 0.0092443277 0.0089962229 -0.0215371493 0.0102619082 0.0305955836 -0.0445253426 0.0390620349 -0.0026072615 -0.0334828389 0.0289641008 0.0037882098 0.0116628158 0.0227819916 -0.0143604316 0.1073192323 0.0299070721 -0.0215395726 0.0309884107 0.0684343379 -0.0624809315 -0.0237412516 -0.1021227971 0.0214918432 -0.0835921095 0.1007827402 -0.0657311651 -0.0296448707 -0.0567946602 0.0401487938 0.2655207266 0.1497743121 0.1020585752 -0.0502046463 0.0372753051 0.0007224047 0.2197240161 -0.1022745150 -0.1887862802 0.0623277041 0.2441147198 -0.2140946150 0.1443259824 -0.1225781634 -0.1229101615 -0.0930148488 0.1050672315 0.0977304337 -0.1860081859 -0.0641642993 0.0232445509 -0.0385968646 -0.2686922473 0.0590319280 0.0986993408 -0.1216714472 0.0137827265 -0.2347488190 -0.1098528550 0.0881693563 0.1021992523 0.0260818049 -0.0264287870 0.0848334497 -0.2145209396 0.1386278464 -0.0083153398 0.0016563961 0.0016179649 -0.0172659773 0.0070233461 0.0024751654 -0.0181925037 0.0064636236 0.0038775139 -0.0205016787 -0.0007795372 0.0059935645 -0.0145433942 -0.0038329595 0.0046407682 -0.0129047044 -0.0035456746 0.0030773622 -0.0223444477 0.0074338440 0.0000542644 -0.0161816546 0.0071394648 0.0014675055 -0.0229488592 -0.0052722972 0.0052871659 -0.0095073033 -0.0047967032 0.0075834362 -0.0139610403 -0.0063662495 0.0070520581 -0.0034743696 0.0186758641 0.0030549916 -0.0027602558 0.0220203935 0.0001350477 -0.0048804731 0.0210752182 0.0005402603 0.0016821971 0.0225329238 0.0027622723 -0.0017383104 0.0175613769 0.0068254313 -0.0061123958 0.0215600295 0.0042462415 -0.0027700143 0.0210233493 0.0012648999 -0.0187905270 -0.0003214071 -0.0019618206 0.0060996423 0.0221836010 0.0003798633 -0.0036146077 0.0171429761 0.0060929576 -0.0264276439 -0.0074948317 0.0043851297 -0.0218365395 -0.0066980234 0.0043376813 -0.0190782048 -0.0156898383 -0.0021887351 -0.0329412690 -0.0086507968 -0.0056775440 0.0022056684 0.0012848849 -0.0088358317 0.0010033882 0.0017525394 -0.0145638524 0.0158999919 0.0042648492 0.0054919006 0.0173769534 0.0084837354 0.0097038817 0.0277574321 0.0016121574 0.0149635845 0.0279264776 0.0082493842 0.0254860216 -0.0049464722 0.0083803087 -0.0210953091 0.0042787426 0.0108098268 -0.0107572995 -0.0160056167 0.0106765084 -0.0274792964 0.0018582808 0.0125608702 -0.0138554519 0.0045375816 -0.0018048356 0.0008899466 0.0053311242 -0.0017779614 -0.0057228746 -0.0035308996 -0.0021722659 0.0128184583 -0.0057012796 -0.0019781434 0.0165316914 -0.0092655892 -0.0017287729 0.0173625472 -0.0126682521 -0.0002707220 0.0293886880 0.0105246475 -0.0030107888 -0.0138868214 0.0038815314 -0.0030248147 -0.0023052232 0.0183651417 -0.0036402957 -0.0255314783 0.0059829274 -0.0029917068 -0.0062203398 -0.0045718349 -0.0048416645 0.0305331635 0.1331073270 -0.1879797549 0.0494263220 -0.2091232003 -0.0158425851 0.1239978007 0.0659839892 0.1649292950 -0.0827459445 -0.0176157734 0.0188454185 0.0607597083 -0.0038596194 0.0415478889 0.0793878507 -0.0302047217 -0.0050505861 0.0812053691 -0.0112569714 0.0281795972 0.0547613413 0.0174461923 -0.0269051197 0.0221870329 0.0301977001 -0.0199987080 -0.0094619933 0.0167203017 -0.0164148161 -0.0110507136 0.0060666258 -0.0115188218 -0.0301140624 0.0175854803 -0.0243786139 -0.0115440351 0.0052311276 -0.0087400546 -0.0172650424 0.0088812272 -0.0092989141 -0.0279740037 -0.0066554276 -0.0063304667 -0.0085928997 -0.0115527710 -0.0090616901 0.0094667779 -0.0139901416 -0.0065183258 0.0018852164 0.0112927106 -0.0167080586 -0.0206203935 0.0156895683 -0.0286849047 -0.0176048564 0.0227595898 -0.0123154752 -0.0074014478 0.0602228144 -0.0161145827 0.0323980165 -0.0040889792 0.0208107748 -0.0221930512 0.0055171587 0.0272809060 -0.0324511324 0.0134315775 -0.0290971017 0.0087752035 0.0054660768 -0.0147678557 -0.0010903840 -0.0027471922 0.0125798275 -0.0157107353 0.0141316867 -0.0217701917 -0.0028192665 -0.0174900748 0.0147118782 -0.0117048827 -0.0158658794 0.0222451333 -0.0173895640 -0.0003420943 0.0005349531 -0.0180141909 0.0268960403 -0.0386295662 0.0030602323 -0.0315224387 0.0258206707 -0.0113407662 -0.0285538794 0.0345458966 -0.0235442011 0.0040377406 0.0142729263 -0.0145918682 0.0116612540 -0.0037088840 0.0131756084 0.0119515585 -0.0120983382 0.0271929296 0.0222859599 -0.0031988006 0.0166366531 -0.0109003500 0.0140769782 0.0200770898 0.0250002339 -0.0125559991 0.0165605218 0.0154553787 0.0004074765 0.0282609883 -0.0067033922 0.0157631091 0.0258089848 0.0101159048 -0.0093794941 0.0162712427 0.0331982965 -0.0216807544 0.0150059181 0.0315092330 -0.0118365666 0.0402819840 -0.0174792168 0.0273471729 0.0287904875 0.0105606259 -0.0196049940 0.0107168118 -0.0275653289 0.0264494475 0.0173007636 -0.0124792855 0.0124692999 -0.0370895964 -0.0043217274 0.0176144170 -0.0425192100 -0.0096346833 -0.0012467692 0.0312559652 -0.0027890038 -0.0185854318 -0.0005670908 -0.0191595727 -0.0008634072 -0.0228513038 0.0101751804 -0.0176319455 -0.0177495944 -0.0023156684 -0.0237030880 -0.0027741737 -0.0298759321 0.0377335748 0.0266921363 0.0013859205 -0.0758957669 -0.0028556775 -0.0230194627 0.0080336961 -0.0451747356 -0.0460472353 0.0539582074 -0.0295353702 0.0290267743 0.0235775523 0.0424556117 -0.1082758564 0.0039592715 -0.0468313729 0.0669152625 0.0297229418 0.0755990090 -0.0868949137 0.1456005622 0.0884396166 -0.0590992666 -0.2640107318 0.1178911719 -0.0530742303 0.1366694897 0.0652912133 0.1371332991 -0.1159222134 -0.2050413590 -0.0892751186 0.0538861252 -0.1770513093 -0.0249704344 -0.1056909917 -0.0391071698 0.0170819015 0.1236752274 0.0232740872 -0.0598117950 -0.0020217299 0.0444194540 0.1298603504 0.0856550863 -0.0087440223 0.0738484459 -0.0389518684 0.1463212012 -0.0004774116 0.0021489831 0.0520308622 -0.0261892262 0.0286249452 0.0492375075 -0.0398654531 0.0561096372 0.0342039805 -0.0549201092 0.0468486150 0.0300893265 -0.0459384100 0.0419017272 0.0312768886 -0.0269862125 0.0175730672 0.0426358534 -0.0309749358 0.0178677513 0.0505217591 -0.0366042230 0.0659350945 0.0224945052 -0.0541394069 -0.0149866594 0.0066311272 -0.0417515083 0.0528653375 0.0303154426 -0.0310244598 0.0111339706 0.0533454283 -0.0007650367 0.0101787632 0.0270665722 0.0103855442 0.0263606474 0.0160596981 0.0165390434 0.0243321328 0.0118294511 0.0162842415 0.0206204716 0.0166580555 0.0027373339 0.0076790262 0.0262085402 -0.0041074947 0.0072107699 0.0291253772 0.0126173913 0.0336942363 0.0111455270 0.0045278017 -0.0054010756 -0.0044606382 0.0198200309 0.0238408462 0.0147807417 0.0025262290 0.0034673642 0.0302575394 -0.0808243815 -0.0582490191 0.0008335429 -0.0210033267 -0.0440399213 -0.0119256018 0.0127699940 -0.0334070507 -0.0072308955 -0.0199862880 -0.0116348208 -0.0143093461 0.0091557481 -0.0032084021 -0.0388212482 0.0059047777 -0.0015733046 -0.0364729419 0.0336733738 0.0167088738 -0.0396697431 0.0497499750 0.0331832637 -0.0026265424 0.0508695884 0.0122259675 -0.0565147275 0.0686605422 0.0397000092 0.0149048022 0.0114847265 0.0196794463 -0.0154087206 0.0433126659 0.0350022689 0.0099790514 -0.0058312864 0.0235768715 -0.0070114698 0.0558754238 0.0455422704 0.0393942767 0.0077110423 -0.0046737161 -0.0268397829 0.0032310343 -0.0038437615 -0.0300840855 0.0027649833 0.0064776243 -0.0064953162 -0.0160486499 0.0190476299 0.0173797951 0.0094957751 0.0056239957 -0.0014925164 -0.0265646497 0.0270732944 0.0437629674 -0.0055870668 0.0082527075 -0.0276014900 -0.0171319409 0.0189781330 0.0040974557 -0.0113652726 0.0088121764 -0.0394511147 -0.0284678283 0.0261650728 0.0182998728 0.0388256947 -0.0212960788 -0.0193093701 -0.1744954576 0.2474363197 -0.0738717980 0.3661398827 -0.0292966345 -0.1947861604 -0.0346319604 -0.2766097764 0.1967524124 0.0147191293 -0.0270847399 0.0445243068 0.0301207072 0.0485889622 0.1144117091 0.0367842224 -0.1168549015 0.0825263086 -0.0133295436 -0.0122777447 -0.0291646710 -0.0124385848 0.0150216603 -0.0165141349 -0.0136149303 0.0172857587 -0.0170544438 -0.0053596167 0.0147612394 0.0025470950 0.0251429605 0.0138875334 0.0358231622 0.0218160039 0.0101864578 0.0279156617 0.0468337375 0.0395321166 0.0168970543 0.0269807080 0.0227766427 0.0382520076 0.0532707184 0.0267678894 0.0088328925 0.0476615510 0.0498762973 -0.0278144460 0.0785145182 0.0253794797 0.0073017759 0.0484498765 0.0356009329 0.0254615355 0.0428144273 0.0230457637 0.0391735781 0.0549098269 0.0098408506 0.0184295283 0.0377042261 0.0000316930 0.0183268957 0.0878499911 -0.0073028550 0.0044739975 0.0142350248 -0.0103566369 -0.0148302649 0.0243794686 -0.0420122466 0.0255380485 0.0053618520 -0.0232033671 0.0126638989 -0.0176814060 -0.0007302479 -0.0091672511 0.0143865797 -0.0288600747 0.0138318206 -0.0352444022 0.0125299400 -0.0107530614 -0.0409513535 0.0182969089 -0.0142621999 -0.0171490993 -0.0025843694 -0.0050101944 0.0333481672 -0.0494231978 0.0239453314 -0.0534371649 0.0274756668 -0.0204113678 -0.0568846909 0.0308576516 -0.0227869283 0.0081739378 -0.0004482841 -0.0107795423 0.0122510176 -0.0140199231 0.0027207070 0.0142089312 -0.0157408015 0.0026235234 0.0163124172 -0.0204250477 0.0001910982 -0.0143852052 0.0109737337 -0.0122750622 0.0252516134 -0.0399749905 -0.0002437690 0.0064181600 -0.0067708362 -0.0033160717 -0.0167188724 0.0199131236 -0.0103496333 0.0150534197 -0.0305132682 -0.0033410666 0.0432687305 -0.0620422346 0.0023406092 0.0139436882 -0.0179106265 -0.0017002975 -0.0356665948 0.0446976405 -0.0130438207 0.0267706417 -0.0478063602 -0.0004206485 -0.0307923539 0.0312812094 -0.0170630345 -0.0542897783 0.0308552415 -0.0083445303 -0.0126755593 0.0078863374 -0.0129111019 0.0061191283 0.0285984569 -0.0648865147 -0.0064988611 -0.0063385333 -0.0029899560 -0.0187598966 -0.0015903726 -0.0166616233 0.0092067654 -0.0154986015 -0.0154523892 0.0033431808 -0.0250939275 -0.0118218158 -0.0473092491 0.0391479103 0.0194066441 0.0046705287 -0.1039533548 -0.0064209301 -0.0156421075 0.0059399549 -0.0527504061 -0.0408901469 0.0488262928 -0.0148031167 0.0338926608 0.0517393986 0.0457077486 -0.1280512242 0.0283593641 -0.0676386655 0.0156313663 0.0331574593 0.0727078045 -0.1042076017 0.1231973188 0.0941616642 -0.0633743089 -0.3254841060 0.1406919280 -0.0767795582 0.1346614159 0.0697426658 0.1710749651 -0.1532570913 -0.2256140248 -0.0022887132 0.0039857439 -0.0575444216 0.0065525089 0.0257173906 -0.1058389538 -0.0787390157 0.0225855907 -0.0450359027 -0.1468542905 -0.0125819886 -0.0455438463 0.1751671363 0.2501816460 -0.0141611112 0.1329121151 -0.0858100423 0.2421009534 -0.0145837157 -0.0144728650 -0.0429500163 -0.0057785639 -0.0478350475 -0.0258346121 0.0014426714 -0.0733293779 -0.0105748690 0.0053163327 -0.0717192027 -0.0064387997 0.0093705656 -0.0656234316 -0.0176514424 -0.0071869049 -0.0355768175 -0.0354475140 -0.0102362617 -0.0487238235 -0.0278087614 0.0009842271 -0.0772608635 -0.0082978680 -0.0092281912 -0.0004895417 0.0142035635 0.0152035339 -0.0695993092 -0.0137618412 -0.0141238992 -0.0230188058 -0.0419797043 -0.0530139185 -0.0046791206 -0.0621421816 -0.0863151605 -0.0433288040 -0.0447887569 -0.1044752221 -0.0248193607 -0.0379644631 -0.0784016468 -0.0149870715 -0.0383333700 -0.0348591222 0.0245810585 -0.0542289040 -0.0620850352 0.0132665984 -0.0589750614 -0.0861621789 -0.0616947470 -0.0276268624 -0.0846445244 0.0504481760 -0.0111159443 -0.0715841706 -0.0333678400 -0.0415464956 -0.0317980063 0.0485747880 -0.0764234997 0.0060682180 0.0511621432 0.0167211889 -0.0425484144 0.0345648296 0.0302551890 -0.1108863883 0.1079990593 -0.0010024137 -0.0273779033 0.0761042823 0.0081497655 0.0096455389 0.0082738136 0.0364197763 0.0184022497 0.0071458848 0.0287223914 -0.0055892951 -0.0086492962 0.0433080969 -0.0242084143 -0.0245117737 -0.0007338551 -0.0135196977 -0.0062936430 0.0683788683 -0.0409541606 -0.0334482082 -0.0114384231 0.0062556486 -0.0118041218 -0.0045873956 -0.0250955928 -0.0255148550 -0.0319285032 0.0168393635 -0.0141751399 -0.0168521135 -0.0435124389 -0.0357521596 -0.0715855695 0.0287474202 0.0063675654 0.0423874866 0.0392884987 0.0071103279 0.0448846612 0.0203364486 -0.0268938772 0.0191955141 0.0479755043 -0.0654077029 0.0022206933 -0.0075117887 -0.0239715881 0.0034570971 0.0490939293 -0.0874247406 -0.0276641357 0.0617612242 -0.0361984012 0.0562066064 0.0623088606 -0.0670074359 0.0226747286 0.0927362659 -0.0389299446 0.0800312216 0.0775368674 -0.0858649588 0.0127230631 0.0253082641 0.0117242334 -0.0311101691 0.0680100062 -0.0634563872 -0.0581601253 -0.0319439861 0.0246349489 0.0112664708 0.0624885195 0.0858638123 -0.0712953388 0.0042369512 0.0022030925 0.0484326336 0.0271693991 0.0320957887 0.0722588845 -0.0161617410 -0.0294995521 0.0764535607 0.0112096577 0.0151950325 0.0383162737 0.0024998167 -0.0038694167 0.0017833441 0.0074102403 -0.0011109757 -0.0038781868 0.0065388980 -0.0009992090 0.0026095476 0.0114426970 0.0010447157 0.0086095067 0.0113925087 -0.0034982407 0.0076086721 0.0168704867 0.0113565267 0.0032961217 0.0124242453 0.0051192446 0.0067795647 0.0227446013 0.0069500473 -0.0042263545 0.0180458700 0.0158947934 -0.0113170943 0.0316369990 0.0064118638 -0.0042073730 0.0168881448 0.0095944264 0.0075911984 0.0153180964 -0.0014001811 0.0081253572 0.0186141197 -0.0013587418 0.0046980038 0.0161812092 -0.0061484615 0.0098091038 0.0256956522 -0.0022790057 -0.0026884930 -0.0018515434 -0.0035905685 -0.0183833812 0.0212110834 -0.0133704248 -0.0067288811 0.0088021419 -0.0092778821 -0.0095324251 -0.0147105420 -0.0079698930 -0.0080408454 0.0144683112 -0.0151187910 0.0033846849 -0.0178863628 0.0056167644 -0.0266325043 -0.0248590758 0.0000318827 -0.0214689848 -0.0098627572 -0.0064844641 -0.0023733163 0.0290771158 -0.0197264872 0.0145710108 -0.0294665900 0.0155785518 -0.0407371913 -0.0424474311 0.0051498330 -0.0331014713 -0.0059101603 -0.0022970824 -0.0095169344 0.0028228881 0.0067423790 0.0024155595 -0.0029119064 0.0101068909 0.0122722344 0.0106123587 0.0120781145 0.0022064705 -0.0059284601 -0.0047569311 0.0093598862 0.0036632752 0.0124971623 -0.0051138433 0.0101263392 0.0075599766 0.0137088959 0.0016009799 -0.0039713691 0.0182316232 -0.0070333727 0.0045653554 -0.0034340689 0.0034924057 0.0178193566 -0.0141856952 0.0162800643 0.0143057195 0.0241802387 0.0026026310 -0.0110873612 0.0289624933 -0.0148045029 0.0040357338 -0.0125771069 -0.0112244528 -0.0121273045 0.0113047017 -0.0332932086 0.0136148836 -0.0020807627 -0.0129767772 0.0028392106 -0.0040301949 0.0056179618 0.0140654209 -0.0190586180 -0.0023777394 -0.0060011487 -0.0093227029 0.0038742057 -0.0023940602 -0.0051514151 -0.0136369984 0.0139415255 -0.0121134609 -0.0111753290 0.0174015982 0.0119017288 0.0408688989 -0.0164409371 -0.0076923614 -0.0129179862 0.0885077965 0.0096889981 0.0216055423 0.0089772254 0.0535644932 0.0184727853 -0.0352467377 0.0036831350 -0.0234669888 -0.0357769498 -0.0321582490 0.1411186755 0.0351158614 0.0816302189 -0.0661152919 -0.0092279068 -0.0369453910 0.1135837402 -0.1260223063 -0.1023095138 0.0291067651 0.1934324796 -0.0450889200 0.0347461069 0.0123589500 -0.0142155197 -0.1144600369 0.1187998028 0.0769946885 -0.0173128521 0.0382246911 -0.0346937027 -0.0187471576 -0.0771711274 0.1505637520 0.1447356219 0.0666192300 0.0909027533 0.1420086470 0.0241824870 0.0599753871 -0.1309049075 -0.2207963289 0.0099165290 -0.1168186736 0.0935275254 -0.1917854893 -0.0032271710 -0.0080473816 -0.0026419098 -0.0063910635 -0.0131452213 0.0023001186 -0.0087354730 -0.0129057819 0.0022073052 -0.0119230275 -0.0128258042 0.0017065061 -0.0083587890 -0.0118590236 -0.0021133027 -0.0085249648 -0.0096169855 -0.0038499794 -0.0078850387 -0.0178841066 0.0029871322 -0.0081890509 -0.0118016686 0.0000301833 -0.0154809802 -0.0053405329 0.0071808330 -0.0059469543 -0.0096711462 -0.0016737348 -0.0120808863 -0.0068935645 -0.0033327878 -0.0104521224 0.0080067724 -0.0198986939 -0.0236122278 -0.0055570996 -0.0117105616 -0.0328978931 -0.0015794302 -0.0076807669 -0.0237475673 0.0016971519 -0.0075222746 -0.0101311600 0.0135320491 -0.0141048449 -0.0108691640 0.0166025656 -0.0203208484 -0.0228675371 -0.0126889412 -0.0046328588 -0.0308016612 0.0153121306 -0.0035303913 -0.0220284527 -0.0047246315 -0.0082011654 -0.0118518414 0.0201323718 -0.0215907963 -0.0116327308 0.0008547187 0.0081916296 -0.0214673123 -0.0027865307 0.0113574636 -0.0323205684 0.0298537717 -0.0033304736 -0.0227183335 0.0199842556 -0.0018237451 0.0093808169 0.0006247921 0.0068394185 0.0119069145 0.0005494317 0.0077471199 0.0058271418 0.0007031071 0.0006348202 0.0019152883 -0.0005427696 -0.0080158409 0.0041604088 0.0010445266 -0.0003668347 -0.0036399352 -0.0010184292 -0.0154597928 0.0105223162 -0.0013325584 0.0031115305 0.0045034490 -0.0011962832 -0.0062205541 0.0127375178 -0.0017910145 0.0040742721 0.0012651619 -0.0012301188 -0.0120204497 0.0163039005 0.0000836272 0.0041663152 0.0183264270 0.0004353380 0.0068982256 0.0156605779 -0.0087525070 -0.0035363016 0.0185480951 -0.0192467260 0.0005770390 0.0111693729 -0.0082488622 -0.0116002035 0.0180025312 -0.0258344295 -0.0069949422 0.0192817286 -0.0113177083 0.0204838560 0.0168782475 -0.0190822747 0.0166536804 0.0245307894 -0.0117793358 0.0329058279 0.0149668936 -0.0233555656 0.0244624507 -0.0127501093 -0.0403278508 0.0184150000 -0.2589700997 0.3023745182 0.0139190871 0.3523573259 -0.0691809780 -0.1976831079 -0.1312947546 -0.3702001691 0.2644074391 -0.0048262526 -0.0201050674 -0.0414797835 -0.0231330462 -0.0006130285 -0.0189501706 0.0349110847 -0.0453561345 -0.0475743033 -0.0313018464 -0.0244685924 -0.0819481089 0.0107967992 -0.0141748282 0.0104541814 0.0256293248 -0.0125970094 0.0166514391 0.0188428067 -0.0107989208 0.0143231296 0.0053122905 -0.0038070125 0.0001490994 0.0023881169 -0.0095079580 -0.0077085913 0.0053766657 0.0033952686 -0.0007059305 0.0059856793 -0.0014202160 -0.0064749349 0.0167849372 0.0012609212 -0.0143602971 0.0118348272 0.0053278943 -0.0089940024 0.0207848296 0.0009584151 -0.0143568959 -0.0000022542 0.0114215652 0.0023936050 -0.0089460042 -0.0160878533 -0.0187861054 -0.0039581107 -0.0007994863 -0.0098379429 -0.0090291156 -0.0170105390 0.0094493586 -0.0056967994 0.0154281307 -0.0269871163 -0.0053058525 -0.0124722638 0.0071146682 0.0060355713 0.0141536690 -0.0200330256 0.0060755413 0.0052071774 -0.0138981669 0.0015239793 -0.0113357090 0.0039573510 0.0036188102 0.0048591241 -0.0026207266 0.0078809868 -0.0053009088 -0.0150328414 0.0052291937 -0.0141882618 -0.0079176354 0.0029186411 -0.0046763479 0.0049627755 0.0036848826 0.0155563340 0.0006687518 0.0091291422 -0.0058686597 -0.0220750528 0.0019295694 -0.0209291676 -0.0119849171 -0.0048825237 -0.0141873902 0.0097121708 -0.0040298616 0.0013447703 0.0045660357 -0.0065504050 0.0047044079 0.0055970835 -0.0097990488 0.0126628206 0.0026855316 0.0075424270 -0.0104299016 0.0102898200 -0.0101396487 0.0141805355 0.0039937284 -0.0101380800 0.0132220038 0.0027890819 -0.0005165512 0.0000890094 0.0063633966 -0.0008343030 0.0014903490 0.0076064141 -0.0147909035 0.0195464729 0.0036331190 -0.0128040050 0.0174940055 0.0017311823 0.0028425900 -0.0040257303 0.0063137156 0.0010403038 -0.0013892267 0.0079952116 0.0186935081 -0.0254382252 0.0138769908 0.0040728646 -0.0078848549 0.0037790258 0.0015838128 0.0012260761 0.0022890571 0.0064348685 0.0058023409 -0.0040171153 0.0089145784 0.0016203838 -0.0034456555 -0.0059045410 0.0206091985 -0.0215739152 -0.0207541983 0.0234760631 -0.0181839148 -0.0261774792 0.0220904366 0.0077972706 -0.0333760044 -0.1016274566 -0.0464233465 -0.0429223243 -0.0035351490 0.0506351719 0.0549205767 0.0533979747 0.0795775957 -0.0097426481 0.0255981794 -0.0293187274 0.0223503622 -0.0104610450 0.0104549869 0.0576696294 -0.0640352720 0.0398448762 -0.1982505555 -0.0861448028 -0.1685426107 0.0358085057 -0.3042373275 -0.0816223817 -0.0281355975 -0.0122303138 0.0836294808 -0.1026840777 -0.0084105266 0.0482057998 -0.0262013461 -0.0081408118 0.0768172465 0.2927346066 -0.0584980768 0.3228849291 0.0621125496 0.3732822673 0.0581360333 -0.0857618322 -0.1502081735 -0.0428374229 -0.2480820498 -0.1039583567 -0.1140897354 0.1645258756 0.2632220586 -0.0419679379 0.1781327293 -0.2258446339 0.2209725994 0.0018851751 -0.0065136421 0.0119345595 -0.0097461276 0.0078302452 0.0077615710 -0.0162581464 0.0193443955 0.0021012050 -0.0206214207 0.0154206648 0.0015054047 -0.0144906986 0.0090862678 0.0033850369 -0.0063495239 -0.0041928197 0.0096726047 -0.0118404428 0.0049523494 0.0076496104 -0.0154684917 0.0233711185 -0.0021692132 -0.0189674286 -0.0045007930 0.0027909804 -0.0117253432 0.0112754040 0.0041228204 -0.0051497590 -0.0113675879 0.0160608237 0.0026691691 0.0032430769 -0.0026498205 -0.0035542495 -0.0016625200 0.0027689597 -0.0081053455 -0.0004821319 0.0046957715 -0.0075542958 -0.0013470738 0.0054413616 -0.0026577718 0.0033243935 0.0004100903 0.0057016951 0.0072225959 -0.0044114638 -0.0013420118 -0.0027078461 0.0052191311 -0.0030230582 0.0114244346 -0.0038740658 -0.0086249037 -0.0032675989 0.0062051895 -0.0049815047 0.0050566094 -0.0024563181 -0.0179797932 -0.0163565232 0.0035945514 -0.0154125770 -0.0170151268 0.0039860698 0.0070977945 0.0144290142 -0.0083224895 -0.0035563554 0.0212604906 -0.0110784221 0.0158335688 -0.0041293522 0.0051588067 0.0154544129 -0.0036440754 0.0120166266 0.0094557049 0.0051668102 -0.0215462804 0.0067342026 0.0111382839 -0.0239379630 0.0058338071 0.0055797674 -0.0420966346 -0.0032653483 0.0162150618 -0.0465131838 0.0206717777 0.0011493264 0.0224117769 0.0185369183 0.0092737952 0.0076568325 0.0238106521 0.0005590747 0.0344301475 0.0204387248 0.0150867636 0.0149729658 0.0143922916 -0.0023236079 -0.0159614274 0.0133939784 -0.0021353099 -0.0096073847 0.0197159422 -0.0026828933 -0.0230172003 0.0118268879 -0.0040291209 -0.0070311233 0.0269176521 -0.0032172671 -0.0315814785 0.0120871959 -0.0066396891 -0.0107480519 0.0014058110 -0.0028757449 0.0151199400 -0.0020055218 -0.0026128206 0.0214363348 -0.0069789866 -0.0021786562 0.0319626992 -0.0147624391 -0.0016758809 0.0443948898 0.0288419878 -0.0374791524 0.0076209129 0.0469864400 -0.0585764084 0.0159566069 0.0070185757 -0.0642145527 -0.0080481305 0.0500117047 -0.0251519164 0.0219644559 0.0080871557 -0.0013119037 -0.0141233283 0.0123682198 -0.0420358539 -0.0542152748 -0.0103784000 0.0448776128 -0.0299106359 0.0217292916 -0.0116479367 0.0298046000 0.0342029315 -0.0431034448 0.0303566926 0.0879655019 -0.0377306979 0.0565308672 0.0650170747 -0.0316685823 0.0496923604 0.0247902420 -0.0088200201 -0.0054142449 0.0180532166 -0.0293224619 -0.0265857752 0.0215546503 0.0219713294 -0.0097404878 0.0175159126 0.0033223681 -0.0210755988 0.0419921004 0.0147084464 -0.0237842011 0.0321004671 0.0290354282 -0.0229803337 0.0538363115 0.0133693731 -0.0160456274 0.0097383254 0.0442999826 -0.0058750897 -0.0064211111 -0.0418219171 -0.0585333504 0.0089856803 -0.0005421158 -0.0329290474 -0.0102065055 -0.0545643194 0.0282005267 0.0095280635 0.0406620041 -0.0807662626 -0.0328000751 0.0158635796 0.0621247135 -0.0258465310 0.0484102994 0.0200977672 -0.0085190836 0.0358439745 0.0286540574 0.0267529882 0.0190647553 0.0348784216 -0.0001678880 0.0265183419 0.0290397446 0.0098147304 0.0230851842 0.0395822280 0.0292117687 0.0173028287 0.0392145455 0.0288921511 0.0195647322 0.0340843571 -0.0092389149 0.0291111087 0.0220255728 0.0099917383 0.0227835680 0.0454851811 0.0456175345 0.0097203322 0.0493946881 -0.0152214982 -0.0018289685 0.0437176812 -0.0515556963 -0.0427722866 0.0020863374 -0.0327185807 -0.0461636264 -0.0473164920 -0.0850890626 -0.0561622281 0.0006582400 0.0237691096 0.0089224163 -0.0283695074 -0.0610842254 -0.0350764278 0.0405410871 -0.0621863319 -0.0534588086 -0.0590557665 -0.0041038373 -0.0173898070 -0.0740897401 -0.0019322843 0.0020843371 0.0325765176 -0.0779922249 -0.0396439050 0.0834057054 -0.0815897352 -0.0794467387 -0.1002640899 0.0176914615 -0.0169222031 -0.1243067924 0.0240957591 0.0260259421 0.0765852582 0.0655689296 0.0344792203 -0.0355453441 0.0547041445 -0.0080244390 0.0141765007 0.0455171563 0.0216944407 0.0105151563 0.0131122236 0.0287422516 -0.0160001369 0.0013938409 -0.0070940717 0.0032828797 0.0166749553 -0.0168819066 0.0165735265 0.0146713498 -0.0009218629 0.0029222121 0.0141325909 0.0050252097 -0.0059772295 0.0292985979 0.0528221884 0.0138293087 0.0145644818 0.0482087381 -0.0099282668 -0.0083029489 -0.0193966927 -0.0165970640 0.0304857001 -0.0410463698 0.0287784976 -0.0089996658 -0.0048891060 -0.0175862018 -0.0007866187 0.0305540041 -0.0105858390 0.0969877547 0.0465720860 0.0599284408 0.0062743634 0.1353049446 0.0173222439 0.0423215203 0.1286140221 -0.0592619843 0.0507908550 -0.0273122104 -0.0339759987 -0.0562671025 0.0689061433 0.0575097594 -0.0967570946 0.0211292743 -0.1022153237 -0.0189870267 -0.1391310303 0.0104837896 0.0640151753 0.0479265813 0.0246322938 0.1597558060 0.0509839877 0.0395592872 -0.1141598385 -0.1601815439 0.0262094786 -0.1043739178 0.1270587269 -0.1541242405 0.0015250655 -0.0230291623 0.0313018238 -0.0370915619 0.0170596435 0.0226271725 -0.0575382183 0.0487323501 0.0072238877 -0.0734922056 0.0342749303 0.0059174882 -0.0504727828 0.0141735207 0.0091206429 -0.0269010737 -0.0214663065 0.0254407748 -0.0464223364 0.0067003127 0.0214220685 -0.0523556490 0.0597191996 -0.0073073041 -0.0742306096 -0.0130755149 0.0120696959 -0.0390789713 0.0213894183 0.0126415563 -0.0260586938 -0.0419017153 0.0462285045 -0.0089699982 0.0173233538 -0.0134777212 -0.0320335940 -0.0061631433 0.0006287938 -0.0454802506 -0.0074951849 0.0071479621 -0.0342442758 -0.0032284457 0.0081460574 -0.0109401385 0.0225256469 -0.0060100868 -0.0049984994 0.0323784943 -0.0165241902 -0.0309414547 -0.0140321350 0.0089450032 -0.0387541023 0.0123321391 -0.0053583852 -0.0359788938 -0.0155164132 0.0101792456 -0.0109091450 0.0334622422 -0.0164472683 -0.0708813594 -0.0426240442 0.0142171868 -0.0705956797 -0.0401492033 0.0176145265 -0.0257913618 0.0211806570 -0.0105222022 -0.0400086548 0.0268358547 -0.0144557158 0.0584904008 -0.0116994589 0.0237836897 0.0589269139 -0.0097457222 0.0355604708 0.0354011066 0.0127617667 -0.0575819300 0.0201231212 0.0266395959 -0.0814672707 0.0238468588 0.0142728664 -0.1121544653 -0.0172010776 0.0391301954 -0.1557482957 0.0742988390 -0.0006910669 0.0620263942 0.0586120296 0.0202177764 0.0082156732 0.0877824526 -0.0029570659 0.0991514012 0.0604098461 0.0343496426 0.0209244312 0.0320682780 0.0001004752 -0.0338679289 0.0329001015 0.0006856923 -0.0143309742 0.0380911225 -0.0077375427 -0.0491997657 0.0274995311 -0.0205452760 -0.0180770460 0.0452237975 -0.0077027940 -0.0669527629 0.0253030460 -0.0321996678 -0.0296363886 0.0128672207 -0.0113759889 0.0399766626 0.0053744810 -0.0186105471 0.0446977201 0.0019854805 -0.0105279539 0.0818279169 -0.0172009986 -0.0223210429 0.0905175321 -0.0143877446 0.0317895308 -0.0135119260 0.1708776757 -0.2212999935 -0.0023807554 -0.2946660839 0.0643428796 0.1626948741 0.0614776538 0.2790904852 -0.2161743231 0.0075221741 -0.0121073242 0.0193508529 0.0212776728 -0.0214916083 0.0068335619 -0.0101973326 0.0018075719 0.0210196496 0.0189680995 -0.0128007433 0.0416878559 -0.0087872215 0.0031105254 -0.0235782731 -0.0239104554 -0.0006328000 -0.0349959957 -0.0227148353 -0.0008051694 -0.0401524768 -0.0015516674 -0.0030341724 -0.0213393970 0.0024370363 -0.0038468868 -0.0175581205 0.0044078277 -0.0041705845 0.0136591234 -0.0008226913 -0.0034517665 0.0219122726 -0.0245976069 -0.0000502670 0.0409310357 -0.0106933324 -0.0073578128 0.0220770177 -0.0275332431 0.0004035516 0.0368580603 0.0135785057 -0.0046006420 -0.0016634744 0.0092751675 -0.0069919689 -0.0056794792 0.0120629036 -0.0001011069 -0.0016825582 0.0145943059 -0.0145939506 0.0208543651 0.0134079230 0.0145233312 -0.0223306877 0.0054854138 0.0336451804 0.0184943685 -0.0127726349 -0.0177302064 0.0672354969 -0.0113973015 0.0029236926 0.0529863411 0.0203882759 0.0293181801 0.0150292042 0.0272916819 -0.0265803527 0.0446713153 -0.0555011555 0.0621746688 0.0323567384 -0.0215606205 0.0640334221 0.0251446130 0.0151201709 0.0188158796 0.0111641583 0.0444592070 -0.0696325571 0.0464580708 -0.0973190537 0.0956492703 0.0293690561 -0.0270357030 0.0895011739 0.0270274884 0.0138027301 0.0193758027 0.0108969581 -0.0082267423 -0.0456158226 -0.0030495696 0.0101797206 -0.0518495184 -0.0407229378 -0.0351070439 -0.0585423144 -0.0148282183 0.0076896806 0.0059941135 -0.0531037841 -0.0261591907 -0.0475460188 -0.0007501236 -0.0187576026 -0.0597254818 -0.0569292601 0.0031694201 -0.0206847335 -0.0725817135 -0.0005901738 -0.0108101856 -0.0110033607 -0.0301849226 -0.0546391998 0.0209686971 -0.0264221647 -0.0893846631 -0.0841258254 0.0104441791 -0.0141833541 -0.1014649366 0.0124447685 0.0106339608 0.0164649571 0.0195283708 0.0382671756 -0.0614325848 -0.0232235840 0.0525060095 -0.0281370430 0.0023445709 0.0515703143 -0.0354409837 -0.0041366641 -0.0152739428 -0.0049119824 -0.0002675452 -0.0209994893 -0.0086336364 -0.0133499124 -0.0228465195 -0.0236268855 -0.0086097051 0.0088320971 -0.0537968910 -0.0417156805 0.0086402206 -0.0159898301 0.0231347923 -0.0142416590 -0.0359622587 -0.0603359737 0.0100311082 0.0276371451 0.0438243270 0.0042111382 0.0820835209 -0.0080000430 -0.0197196478 0.0274645828 0.0500571306 0.0648645455 0.0412947741 0.2032453172 0.1272622355 0.1019610138 -0.2058290492 -0.0005962993 -0.0602061392 0.1549891650 -0.2343745654 -0.1962500977 -0.0427629234 -0.0009891708 0.0672725783 -0.1073974766 0.0287562503 0.0328297440 -0.0530425762 0.0083045629 0.0255548752 0.0173137762 0.0410777645 -0.0521752086 -0.0362768742 -0.1000341273 0.2736903774 0.2619377015 0.0855066673 0.1361440391 0.1791945898 0.1043998837 0.0621821665 0.0462144981 -0.0156257737 0.0349818189 -0.0307856020 0.1753010866 0.0385473020 -0.0016956329 0.0178070373 0.0051168436 -0.0035980096 0.0129778414 0.0155742877 0.0036404733 0.0123831466 0.0279131048 0.0100588101 0.0143578831 0.0286411238 0.0104320571 0.0211151829 0.0236079662 0.0072103088 0.0248882283 0.0089204078 -0.0107366314 0.0109638501 0.0134921866 -0.0014574968 0.0113245468 0.0340890252 0.0074509920 0.0003423218 -0.0022781823 0.0156302389 0.0250678567 0.0251189783 0.0107138769 0.0311009176 -0.0003672239 -0.0007906993 -0.0082366292 -0.0127818556 0.0075500141 -0.0042519681 -0.0229116724 0.0117149210 -0.0058723825 -0.0236135891 0.0113669284 -0.0087816693 -0.0225176762 0.0056492487 -0.0163222959 -0.0112070476 -0.0064245926 -0.0087394106 -0.0101474085 0.0045255708 -0.0012356864 -0.0280840246 0.0098412626 -0.0011541176 0.0032340659 0.0160394941 -0.0086888139 -0.0254828197 0.0072142321 -0.0218453170 -0.0052146756 -0.0285762796 -0.0177662059 -0.0120324951 0.0391932155 0.0009706544 -0.0296228153 -0.0139278579 0.0146917781 0.0121579936 0.0327819797 -0.0109744423 0.0216775196 -0.0202858708 -0.0039924906 -0.0365421368 -0.0220764981 -0.0017411164 -0.0511022296 0.0098696850 -0.0146540056 0.0254825187 0.0206101878 -0.0200728524 0.0416680063 0.0303506236 -0.0186497294 0.0694824096 0.0525341387 -0.0285487450 0.1015952879 -0.0324111198 -0.0040243047 -0.0689276279 -0.0144911517 -0.0142155078 -0.0301648592 -0.0487316832 -0.0000640874 -0.0905422702 -0.0171047651 -0.0204625942 -0.0391255248 -0.0209241743 0.0020149249 0.0536407967 -0.0212741861 0.0041967938 0.0371436584 -0.0256541685 0.0131488821 0.0734807233 -0.0066308940 0.0247233066 0.0308858057 -0.0349303196 0.0129698806 0.0946031205 -0.0033000012 0.0352073791 0.0393456733 0.0082002657 0.0134242544 -0.0289802808 0.0240657286 0.0213981460 -0.0450995701 0.0233137066 0.0122965387 -0.0774502151 0.0561749670 0.0249086065 -0.1085187079 0.0865463579 -0.0657712179 -0.0315341516 0.1785646658 -0.2112515591 -0.0603636729 -0.0290255512 -0.0936792216 -0.0003057970 0.1796687084 0.0624571647 -0.0609850708 -0.0002451534 0.0113952178 0.0546220427 0.0130046615 0.0398983220 0.0788534599 -0.0383478002 -0.0113931076 0.0879368949 0.0233118341 0.0388520887 0.0490997303 -0.0045202226 -0.0020791859 -0.0307710026 -0.0078537544 -0.0061716653 -0.0315717747 -0.0127332630 -0.0047358322 -0.0408684823 0.0076931959 -0.0001630632 -0.0311141101 0.0097812699 -0.0084471325 -0.0354346500 0.0103604896 0.0112085384 0.0251126921 0.0026782831 0.0045183289 0.0296137174 -0.0156236131 0.0146498008 0.0532915368 -0.0000317520 0.0094494238 0.0253971098 -0.0127138029 0.0149369663 0.0460999282 0.0157752645 0.0236263304 0.0067281120 0.0135268435 -0.0175777406 -0.0242887630 0.0142938847 -0.0038340201 -0.0094856787 0.0046971751 -0.0448244154 0.0420365117 0.0216778554 0.0260371508 -0.0513979546 -0.0132365866 0.0053460692 0.0166895187 -0.0005626528 0.0058105646 0.0047947030 0.0011868450 0.0061263377 0.0045634053 0.0074659786 0.0104217204 0.0052671203 0.0043565449 0.0020939255 0.0056466723 0.0004489886 0.0105237719 0.0049112438 0.0067751370 0.0106184092 0.0033792465 0.0086632871 0.0070776844 0.0027780472 0.0062445284 -0.0008294522 0.0063793361 -0.0028753199 0.0130401379 0.0074211538 0.0084171308 0.0108953573 0.0043541753 -0.0073693388 -0.0022038282 0.0146588417 -0.0204021092 -0.0123032276 0.0039855793 -0.0146008569 -0.0126237035 -0.0140107791 -0.0287291336 -0.0278102032 0.0104617332 0.0047369666 0.0126475745 0.0004267443 -0.0172161687 -0.0201749545 0.0294920668 -0.0218147778 -0.0245172884 -0.0108570024 -0.0032439668 -0.0041579345 -0.0177351275 0.0002757266 0.0027322412 0.0252343481 -0.0204815988 -0.0282869841 0.0498877350 -0.0286095490 -0.0310073808 -0.0244410582 0.0048387619 -0.0021764567 -0.0392418101 0.0090724440 0.0134503314 0.0417264964 0.0155365420 0.0316843794 -0.0045219392 0.0164391159 -0.0006911267 -0.0143574663 0.0213336742 0.0118852338 -0.0190339952 -0.0005858917 -0.0080602248 -0.0175132889 0.0089627942 -0.0007588810 0.0161232898 0.0226030028 0.0196641175 0.0191397109 0.0121122703 0.0021935448 0.0424814224 0.0313056832 0.0119393351 0.0175816959 -0.0081927940 0.0000273672 0.0202349323 0.0405605500 0.0571543005 -0.0058253861 -0.0126396787 0.0275572360 -0.0404696447 0.0134440628 0.0178504034 -0.0457487421 -0.0535678728 -0.0952965176 -0.0580889501 -0.1504850098 -0.1434537486 -0.0741118116 0.1883504945 -0.0102496660 0.0105421973 -0.1129072046 0.1760835387 0.1470620397 0.0702208337 0.1793134995 -0.0992825910 0.1045736067 -0.0754385490 -0.0477368233 -0.0553901907 0.0851048264 0.1101721142 0.1005729711 -0.0447352563 0.1588397002 0.0574303301 0.2342429524 -0.2097033533 -0.2501164196 -0.1127020689 -0.1293148155 -0.2453415131 -0.1540180026 -0.0924002309 -0.0324790727 0.0318275611 -0.0564581657 0.0641967648 -0.2566584448 -0.0315617242 -0.0027574499 0.0185988618 0.0074483375 -0.0147524505 0.0184006742 0.0221218381 -0.0075777852 0.0200209334 0.0397015099 -0.0017778921 0.0175217727 0.0417022954 0.0060274459 0.0217633659 0.0340764379 0.0051274793 0.0226149826 0.0141806466 -0.0292652566 0.0147303054 0.0173221032 -0.0128078148 0.0200757722 0.0453400606 -0.0081582816 -0.0056774359 0.0018236317 0.0182045689 0.0275876181 0.0386235325 0.0100006859 0.0267275753 0.0061247835 -0.0138542493 -0.0115864830 -0.0252800226 -0.0129822480 -0.0210257063 -0.0359936896 -0.0083434742 -0.0223290185 -0.0362082043 -0.0025682229 -0.0237301864 -0.0345000240 0.0045874112 -0.0160234684 -0.0234770591 -0.0237919811 -0.0072459471 -0.0209871830 -0.0211126078 -0.0221958543 -0.0406981732 -0.0029318495 0.0015001130 0.0041844490 0.0030098437 -0.0316952820 -0.0375030600 0.0121014382 -0.0168309870 -0.0189339322 -0.0565976717 -0.0331292748 -0.0108744168 0.0340469690 -0.0077906781 -0.0333354327 -0.0402335360 0.0388055190 0.0192466237 0.0405209515 -0.0067155311 0.0354384896 -0.0091354359 -0.0048114706 -0.0378631084 -0.0092732568 -0.0012206826 -0.0586617166 0.0205447236 -0.0193668852 0.0280433185 0.0277967992 -0.0303048264 0.0331229101 0.0408519749 -0.0232022108 0.0809196203 0.0558995071 -0.0424275205 0.0930218785 -0.0184996127 -0.0105967377 -0.0807742123 -0.0067460698 -0.0249447443 -0.0470921463 -0.0308513997 -0.0070508302 -0.1026423871 -0.0121071647 -0.0343210771 -0.0631601110 -0.0206418400 0.0103763990 0.0706496173 -0.0162800250 0.0135842537 0.0553386856 -0.0280756792 0.0179048232 0.0909340546 0.0008772313 0.0227257208 0.0374058857 -0.0450660318 0.0183193407 0.1138202459 0.0034626633 0.0290782355 0.0417605144 0.0241344920 0.0151499419 -0.0213363581 0.0434340825 0.0179044778 -0.0486228649 0.0484253088 0.0132622859 -0.0740316479 0.0858037096 0.0168752262 -0.1267884760 -0.0719535853 0.0286198311 0.0435484923 -0.1292580836 0.1300642695 0.0807598405 -0.0082287611 0.0465755885 0.0288300535 -0.1464392160 -0.0600164260 0.0506526257 0.0207739408 -0.0516954404 -0.0342941409 0.0212167047 -0.0683043908 -0.0503424066 0.0601154821 -0.0417893490 -0.0605045441 -0.0103468595 -0.0789448830 -0.0388883384 0.0015119677 -0.0059366070 -0.0251867485 0.0132092322 -0.0088386697 -0.0099539186 0.0047808280 -0.0064831212 -0.0207838820 0.0112928981 0.0012495585 -0.0246065163 0.0065465763 -0.0070945613 -0.0394655071 0.0081192621 0.0150170634 0.0260582902 0.0060994819 0.0065902931 0.0207925674 0.0048975512 0.0161444021 0.0332172619 0.0110929787 0.0152572087 0.0186357876 0.0112383311 0.0162997302 0.0245859090 0.0052443581 0.0344482891 0.0120733144 0.0012439771 -0.0179894223 -0.0364741386 -0.0028114911 -0.0056652244 -0.0181504126 -0.0253628809 -0.0445857799 0.0198118300 -0.0003281363 0.0171502253 -0.0432348464 -0.0319763631 -0.0445332489 -0.0084978767 0.0228272287 0.0457322143 -0.1089346473 0.0213621776 0.0066634277 -0.0820062777 -0.0273040934 -0.0441046398 -0.0089052910 -0.0338484741 0.0452345966 -0.0560278277 0.0859626721 -0.0863494731 -0.0538817602 0.0353506965 -0.0956764774 -0.0382062238 -0.0130513794 -0.0277970368 -0.0012477287 -0.0554725977 0.1158416051 -0.0533527710 0.1457912104 -0.1339047472 -0.0549019896 0.0390905463 -0.1391083305 -0.0462763308 -0.0373979994 -0.0350017298 0.0047383466 -0.0171394051 0.0567329042 0.0098249921 -0.0385602222 0.0624648202 0.0551045411 0.0025770903 0.0899591642 0.0271628829 0.0056823218 -0.0159144996 0.0904729098 -0.0006216824 0.0831649221 0.0269385701 -0.0101512587 0.0859173746 0.0739536658 -0.0087749964 0.0260364092 0.0970587923 -0.0020394519 0.0217656847 0.0450994902 -0.0102985248 0.1030771579 0.0103972590 0.0025235708 0.1121246853 0.1037043323 -0.0051629643 0.0093378054 0.1198253020 -0.0082065528 -0.0084075308 0.0205138458 0.0188074005 -0.0756154549 0.1053345999 0.0531632399 -0.0900394120 0.0433961429 0.0154114624 -0.0660227068 0.0481370446 0.0071026354 0.0006354152 -0.0142999247 -0.0079218136 0.0181349953 -0.0274664421 -0.0029229409 -0.0001991158 -0.0087230530 -0.0121816283 0.0124755658 -0.0282619884 -0.0227976517 0.0063375560 -0.0095558687 -0.0100214309 -0.0180998310 -0.0242425585 -0.0256613808 -0.0795897566 0.0016225238 -0.0128950752 -0.0391547524 0.0294255045 0.0218635174 -0.0307246845 0.0438658150 0.0352373451 0.0561105998 0.0230064352 0.0857442406 0.0655206685 0.0450972485 -0.1578844692 -0.0083346938 -0.0542982330 0.0611799648 -0.1648557474 -0.0952572608 -0.0828279253 -0.2337102518 0.0891091780 -0.0933000579 0.0519972151 0.0430434000 0.1150031584 -0.1211237419 -0.1175851796 -0.1383927324 0.0207878078 -0.1023462920 -0.0593418713 -0.2243415754 0.1424539237 0.1716234869 0.0508578259 0.0873220919 0.2131745327 0.1103788031 0.0536475365 -0.0255524997 -0.0709461438 0.0440222376 -0.0692027848 0.2000428145 -0.0494287442 -0.0006048246 0.0078467065 0.0048924375 -0.0171870379 0.0137447340 0.0161311113 -0.0132817335 0.0180779251 0.0316094783 -0.0099431251 0.0140013816 0.0336577637 0.0028168281 0.0111073358 0.0282850656 0.0055880157 0.0053336066 0.0128724734 -0.0325767617 0.0105783205 0.0105626574 -0.0168429286 0.0185669546 0.0354540800 -0.0161905694 -0.0100846635 0.0042099940 0.0172216973 0.0146010299 0.0346817461 0.0122888094 0.0025529494 0.0103175241 -0.0118566319 -0.0071060878 -0.0203983879 -0.0178894341 -0.0235682327 -0.0284843121 -0.0158398528 -0.0278832395 -0.0275345906 -0.0058752262 -0.0278770610 -0.0249589694 0.0076045214 -0.0109611537 -0.0172470602 -0.0194523802 0.0025892895 -0.0176156625 -0.0248010185 -0.0232851795 -0.0333118784 -0.0043235971 0.0062651276 0.0002787178 0.0011218159 -0.0384406420 -0.0283958331 0.0177103107 -0.0082945174 -0.0146270784 -0.0527853036 -0.0363595995 -0.0048553631 0.0180355219 -0.0172216878 -0.0218802000 -0.0308009676 0.0416897111 0.0103741033 0.0376071448 0.0114140303 0.0216296759 0.0081337993 -0.0044860687 -0.0194284789 0.0088207758 -0.0016032601 -0.0334863411 0.0220593936 -0.0143618016 0.0142000963 0.0216483388 -0.0238421199 0.0055857291 0.0315922912 -0.0160654214 0.0461750600 0.0309014632 -0.0321992671 0.0319770712 0.0058789444 -0.0120498346 -0.0474964050 0.0055074028 -0.0216399259 -0.0383470681 0.0036557722 -0.0107776422 -0.0579134015 -0.0003604833 -0.0277806761 -0.0531302983 -0.0036500085 0.0101252304 0.0448072518 0.0022484548 0.0125639213 0.0381813400 -0.0066043509 0.0144038087 0.0561417488 0.0108773288 0.0146936922 0.0277328050 -0.0164566924 0.0145027458 0.0675893413 0.0107506966 0.0158185961 0.0295228987 0.0270672273 0.0109311761 -0.0038238239 0.0376386713 0.0115438820 -0.0190985224 0.0424771653 0.0097562151 -0.0332389925 0.0620928227 0.0096803994 -0.0629307411 -0.0289986249 0.0884356278 -0.0597139304 0.0174147928 0.0108035646 -0.0834383164 -0.1002191345 0.1424570599 0.0309860096 -0.0171342369 0.1749861365 -0.1524523532 -0.0124474063 0.0280923041 -0.0323461770 -0.0154519462 0.0178722243 -0.0417215103 -0.0164873795 0.0373629720 -0.0359107308 -0.0067864471 0.0221196938 -0.0158582861 -0.0208572029 -0.0290068812 -0.0009544990 -0.1087924571 -0.0298122835 -0.1077491389 -0.0822440331 -0.0370798997 -0.0820609698 -0.0406231066 -0.0358847392 0.0684580370 -0.0422361840 -0.0337516074 0.0603256653 0.0353711076 -0.0555347183 0.0730205275 0.0460085700 -0.0525098881 0.0682552007 0.0803076021 -0.0683326010 -0.0905589766 0.0137353942 -0.0420468057 0.0045452858 0.1141729251 -0.0685005572 -0.1236746763 0.0703522249 -0.1049884266 0.0570035091 -0.0926862071 -0.0703196975 0.0445565574 -0.0094051161 -0.0202790045 -0.0060210256 0.0235778709 0.0353060201 -0.0581532454 -0.0406680764 0.0410821173 -0.0484886361 -0.0297520841 0.0353735655 -0.0037735725 0.0015637805 -0.0174867485 0.0034586478 0.0021247470 -0.0063420427 -0.0041835796 0.0024827030 0.0360498516 -0.0176991167 -0.0164775783 0.0090815557 -0.0250779292 0.0291365535 -0.0096043141 0.0160267658 0.0234914926 0.0177626843 -0.0047307774 0.0076228309 0.0151264320 -0.0273073275 -0.0238281419 0.0063700204 -0.0323211102 0.0502581716 -0.0281460536 0.0469054673 0.0390318587 0.0159091747 0.0060095033 -0.0211480230 0.0141674646 0.0022937341 -0.0329547221 -0.0138978580 0.0124446006 -0.0267999730 -0.0217277929 0.0052741388 -0.0357025747 -0.0353333791 0.0334303079 0.0028321382 0.0284105317 0.0356789374 -0.0191877442 -0.0197508079 0.0683993822 -0.0240102100 -0.0390136626 0.0198031019 -0.0034859669 -0.0049134356 0.0111574962 0.0003464160 0.0136928159 0.0637836267 -0.0281815666 -0.0274653340 0.0997902612 -0.0245859833 -0.0600381326 0.0052580305 0.0069094103 -0.0014638471 -0.0182941464 0.0074971149 0.0296289531 0.0816898880 0.0124432989 0.0597876975 0.0276790626 0.0620623973 -0.0293915005 -0.0504851007 0.0271672012 0.0064471565 -0.0532556157 -0.0179472966 -0.0154381978 0.0157392696 0.0009263289 -0.0185631584 -0.0075916699 0.0132081076 -0.0030978613 -0.0062039134 0.0085307997 0.0133987180 -0.0247325044 0.0052385338 0.0195196768 -0.0129020045 -0.0120075190 0.0261419701 -0.0092283519 -0.0128606821 0.0002087832 0.0316715746 0.0157358346 -0.0007883879 0.0106998826 0.0178924152 -0.0126103910 -0.0100836202 -0.0024382980 -0.0265798488 -0.0234436895 0.0054867980 0.0636966234 -0.0079760324 -0.0659439273 0.0286057114 -0.0063519237 0.0020796450 -0.0214407526 -0.0127643304 -0.0039270456 -0.0245357795 0.0728181143 -0.0706703700 0.0184697005 0.0365311966 0.0102520814 -0.0064537054 0.0317826362 0.0127760054 -0.0008868186 0.0151205560 0.0036532117 -0.0065073789 0.0393712262 0.0483706460 -0.0106034094 0.0059454418 -0.0030075804 -0.0256975562 -0.0167025257 -0.0202011386 -0.0363174000 -0.0140737786 -0.0004241055 -0.0290780103 -0.0469235916 0.0113338103 -0.0034819191 0.0196039809 0.0307007575 0.0050507800 0.0085426520 0.0337745900 0.0346320308 0.0041006825 0.0518594351 0.0726245498 -0.0072783401 0.0287897925 0.0837804310 -0.0000403777 0.0358547120 0.0441350299 0.0110652805 0.0440447972 0.0006475888 0.0167145946 0.0193958686 0.0292577432 0.0241850427 0.0806603369 0.0268024190 -0.0273150669 0.0104735489 0.0992706864 -0.0146474220 0.0563847479 0.0402293824 -0.0050311635 -0.0356800472 0.0118946834 -0.0072076240 -0.0263381758 0.0473465777 -0.0171822102 -0.0401844006 0.0870607237 -0.0204671956 -0.0159060304 0.0803794089 -0.0047637843 -0.0353615698 0.0365822492 0.0124563305 -0.0529486055 0.0209252693 0.0016592001 -0.0059985837 0.0436492163 -0.0003503323 -0.0851804267 0.0557785008 -0.0246130620 0.0086462195 0.0840652184 -0.0194085177 -0.0616787653 0.0371430204 -0.0034098804 0.0722952638 -0.0102791667 -0.0286591080 0.1117899043 0.0007378753 -0.0444115708 -0.0986404781 0.0268397034 -0.0197842449 -0.1136679173 0.0363862503 -0.0292288141 -0.0918129199 -0.0312653612 -0.0725720400 -0.1068080701 -0.0295454201 -0.0179087056 -0.0302140021 -0.0082749086 -0.0110355129 0.0186391895 0.0273517344 0.1081565538 0.0063192214 -0.0167995846 -0.0163709050 0.1046157331 0.0451659641 0.2071611772 -0.1392097486 0.0173286627 -0.0314348397 -0.0590273583 0.0421841234 0.0563581115 -0.2006666004 0.0278894755 -0.0690163085 -0.0521981246 0.0697821091 0.0877805063 0.1172466185 -0.0688206621 -0.0257926535 0.0976601153 -0.0643451113 -0.0805534147 0.1631012057 -0.0358433912 -0.0364998560 0.0873662631 0.0097434989 0.0693409083 0.2244920093 -0.0443432599 -0.0763027895 0.0849366587 0.0372086371 0.1089356138 0.0438435037 -0.0270465014 -0.0048293051 0.0031495681 0.0200335408 0.1296665055 0.0065666621 -0.0233873603 -0.0045597642 -0.0809787310 0.0642120011 0.2448216404 -0.0526231854 0.0581560798 -0.0260235630 -0.0327018174 0.0290098275 -0.0294718099 -0.0966117671 0.1151952583 0.0536264003 -0.0758299971 0.1024166274 -0.1127799410 0.0206271044 -0.0527262473 0.0001004792 0.0280474379 0.0295705812 0.0772611560 0.0814475149 -0.1540469190 0.0249283910 -0.0327214541 -0.0515687815 -0.0944397289 -0.0013252018 -0.0171377009 -0.0114516028 -0.0071826346 -0.0195080441 -0.0149015429 -0.0086839615 -0.0190713235 -0.0192895765 -0.0092787133 -0.0090434156 0.0037687990 -0.0151315762 -0.0146207210 -0.0128045637 0.0067636877 -0.0026058266 0.0320951493 0.0088634556 -0.0091899806 0.0236624400 0.0265643731 -0.0064349933 -0.0126686176 0.0107935490 0.0011860118 0.0088017360 0.0402354868 -0.0065268979 -0.0267914137 0.0096857874 0.0013883452 0.0208768491 -0.0369466961 -0.0323662421 -0.0183582373 -0.0145957503 -0.0040906349 -0.0157393223 -0.0296461853 -0.0118485398 -0.0193999457 -0.0154346566 0.0130746450 -0.0334721632 -0.0036694196 -0.0300727066 0.0202171866 -0.0051265922 0.0573719183 -0.0392047441 0.0028146943 0.0253784925 -0.0172869496 0.0049080575 -0.0458980102 0.0308125099 0.0234328642 0.0024894019 0.0258673126 -0.0136333171 0.0081193341 -0.0342316446 -0.0051719426 -0.0363984876 -0.0007361698 0.0070770119 -0.0205705048 0.0417722734 0.0302257787 0.0237014803 0.0382157423 -0.0339099637 0.0265736944 -0.0742794080 -0.0234341055 -0.0460469004 -0.0169564336 -0.0054162056 -0.0221813565 0.0165068050 0.0011860061 0.0195241530 -0.0077889704 -0.0050164551 0.0310011252 -0.0076569256 -0.0186922121 0.0684429906 -0.0359125285 0.0252124366 -0.0620257179 -0.0215105142 -0.0377402604 0.0712361907 -0.0624346707 -0.0270376209 0.0760122548 -0.0361933439 0.0013961743 -0.0022302744 -0.0173075547 -0.0162709539 0.0061872316 -0.0490043030 -0.0517902327 0.1033330659 -0.0900958372 -0.0479275497 0.1137029504 -0.0390605651 0.0110933668 -0.0279864942 0.0073781934 -0.0174859383 -0.0055060156 -0.0575372585 0.0649499962 -0.1432540429 -0.0019538378 -0.0314247441 0.0043892004 0.0499648093 -0.0213341769 0.0079473099 0.0476137766 0.0033681908 0.0032198283 -0.0011673486 -0.0000549384 0.0331171161 0.0102352364 -0.0212577707 0.0008160961 0.0083618269 -0.0049117413 -0.0299341473 0.0430992599 0.0193336258 -0.0453978071 0.0469617383 0.0069711265 -0.0149971235 0.0653183802 0.0660666967 0.0201776870 -0.0638169320 -0.0475143490 0.0187281226 -0.0654726615 -0.0219489450 0.0049056760 0.0254694440 0.0065808739 0.0388129464 0.0394566772 -0.0240220379 -0.0069656855 0.0275092253 0.0345365095 -0.0181985453 0.1055832349 -0.0143425612 0.0305585891 0.0852824285 0.0579192024 0.1198365894 -0.1897432260 0.2277559794 -0.0517544351 -0.0841141373 -0.0308238725 0.0486892991 -0.0395081674 -0.0462539728 0.0238222591 -0.0905234568 0.0127190127 0.0346487337 -0.2085176780 -0.2025788085 0.0702242683 -0.0403110029 0.0388362491 0.0472119155 0.0350473329 0.0179263349 0.0307520557 0.0315140987 -0.0145643591 0.0674766375 0.0574939540 0.0057368694 -0.0062573761 0.0062592613 -0.0023213667 0.0067511796 0.0055548267 -0.0026451556 0.0241120396 0.0108785209 0.0044632567 0.0344584044 0.0083620143 0.0099165886 0.0279799066 0.0106210901 0.0177024709 0.0030899555 0.0094862411 -0.0073605136 0.0028083472 0.0048766583 -0.0100836567 0.0237510244 0.0191175786 0.0117682862 0.0024805530 -0.0056674786 0.0147268099 0.0324833442 0.0115069361 0.0319935269 -0.0075349072 0.0073996760 -0.0111415858 0.0036681255 -0.0079357210 -0.0157543374 -0.0013165578 -0.0125634418 -0.0182020746 0.0024433713 -0.0121048589 -0.0065754662 0.0027433711 -0.0076628980 -0.0005087727 0.0071913871 -0.0024125429 -0.0174366098 0.0122133315 -0.0053424889 -0.0169381003 -0.0039515703 -0.0107802667 -0.0220213996 0.0109258163 -0.0048546183 0.0007256232 -0.0033886073 -0.0114637749 0.0007305028 0.0104277619 -0.0051978282 -0.0015801512 -0.0249059021 -0.0085782927 0.0355270337 -0.0164417839 -0.0190360384 -0.0295779387 0.0239945179 -0.0015964208 -0.0135435055 0.0074901808 0.0024179954 -0.0119394273 -0.0135902007 -0.0196410622 -0.0182667164 -0.0108627539 -0.0105397346 0.0031040179 -0.0098957157 -0.0035577591 0.0110626703 -0.0038448928 0.0157006613 0.0123167577 -0.0119772401 0.0008029918 0.0287781697 -0.0006185156 0.0367657017 -0.0236005560 -0.0047237471 -0.0141222602 -0.0082369784 -0.0003718930 0.0012781155 -0.0351349867 -0.0024659887 -0.0218008450 -0.0087977202 0.0061105717 0.0047482099 0.0266079724 -0.0113820585 0.0068125502 0.0264167702 -0.0092450707 -0.0066575277 0.0401499578 -0.0003100936 0.0052083371 0.0273751104 0.0110653182 0.0225962912 0.0546329447 -0.0026069939 -0.0014177596 0.0275750455 0.0169622406 0.0300830418 0.0192739406 0.0001013699 0.0016551881 0.0136508618 0.0126036371 0.0287902306 0.0122364955 0.0008583742 -0.0050256291 -0.0005703811 0.0226377495 0.0458137925 0.1386909600 -0.1388094503 0.0396628936 0.1623335972 -0.1736865031 0.0380844657 0.1418157861 -0.2630522156 -0.0861723216 0.2356305853 -0.1426894414 0.1783279321 -0.0450923496 0.1151166787 0.0011879932 -0.0746109601 -0.0361253475 -0.1377777027 -0.1608682877 0.3075685172 -0.0463396240 0.0639573888 0.1243321160 0.1744895901 -0.0014728803 0.0014461197 -0.0004041347 -0.0004399166 0.0003498039 0.0043437532 -0.0001445662 0.0002886898 0.0038542544 -0.0013529317 0.0003909134 0.0015877861 -0.0028107404 0.0012774094 -0.0015309664 -0.0010101719 -0.0011060606 0.0007025507 0.0004842168 -0.0009036848 -0.0029895175 0.0010868480 -0.0012325027 -0.0031675592 -0.0014802287 -0.0019092747 0.0032127286 -0.0000184448 -0.0012465753 -0.0016552776 -0.0017234393 0.0012699042 0.0003672794 -0.0052328807 -0.0006449725 -0.0038632393 -0.0033754079 0.0015469466 -0.0025593048 -0.0058387908 -0.0032704852 0.0011707043 -0.0038630773 0.0060154958 -0.0065319420 0.0073841142 -0.0137323586 0.0207960216 -0.0039733364 0.0113078948 0.0117952146 -0.0016800022 0.0086919375 0.0135772009 0.0088066967 -0.0039517614 0.0148206086 0.0102361252 -0.0015218479 0.0193258978 -0.0138258821 0.0162506299 0.0057160466 -0.0024909132 0.0057525758 0.0116421416 0.0047964591 0.0027004376 0.0152411785 0.0134178732 -0.0056913385 0.0208289313 -0.0266782547 0.0270159220 -0.0036885528 -0.0036463933 0.0083215669 0.0113394652 0.0094951376 -0.0127273237 0.0159895652 0.0021832463 -0.0043434882 -0.0040116768 0.0015799117 0.0080479144 -0.0251113051 -0.0040765836 -0.0310754909 0.0004481236 -0.0061472978 0.0194073088 -0.0202283032 0.0037092902 -0.0336736745 0.0067687145 0.0008460753 -0.0318874800 -0.0150090474 0.0006790860 -0.0037013110 -0.0246009622 0.0029982651 -0.0042004927 -0.0004836071 0.0092076423 -0.0461680371 0.0177264082 -0.0028181777 -0.0453572878 -0.0270757873 -0.0000287781 0.0040265231 -0.0368953407 0.0068635763 0.0057180207 0.0098287566 -0.0149139511 0.0507527629 -0.0279365658 -0.0136898961 0.0177974839 0.0087623346 -0.0049646693 0.0156186649 0.0075324321 -0.0038494896 -0.0048707708 0.0064054624 0.0424305631 0.0136883557 0.0101985693 0.0542046920 0.0300650967 0.0126895234 0.0219442188 0.0246417169 0.0265314427 -0.0605271110 0.0439691227 0.0606576435 0.0254348828 -0.0001888945 0.0334665955 0.0305314791 -0.1492799070 -0.1431605102 -0.1035434933 0.0416654027 0.0259198420 0.0529864005 0.0224608651 -0.0241796833 0.0251306237 -0.0133319061 -0.0381260500 0.2530425214 0.1552680946 0.2173776221 -0.2444864260 0.0172237016 -0.0085799875 0.1903049032 -0.2615272408 -0.1751788848 -0.1637316330 -0.2759633332 -0.2961836642 0.1892828290 -0.1695391744 -0.1469510764 0.2364159179 -0.2113114636 -0.1909401175 -0.1416264930 0.0549607021 0.0075756206 -0.0763212124 0.0099662630 -0.0386762974 -0.1514078641 0.0669906441 0.0386473561 0.0076268605 -0.0162516413 -0.0243017357 0.0039591927 -0.0226209265 -0.0268741304 0.0361466393 -0.0279790903 -0.0700016956 -0.0022391629 0.0038175533 -0.0020800362 -0.0022176796 0.0049464788 -0.0027407595 -0.0005829871 0.0022152733 -0.0004986347 0.0011690783 0.0002859733 0.0007412638 0.0003301664 0.0015667551 0.0002111223 -0.0010256951 0.0035902096 -0.0014475944 -0.0031121911 0.0069346516 -0.0037356833 -0.0009678733 0.0020540154 0.0001171449 0.0012462074 0.0013778564 -0.0001977572 0.0004503254 0.0011787810 0.0003853916 -0.0006519544 0.0039084708 -0.0021369933 -0.0062575383 -0.0061881517 0.0058710053 -0.0007092454 -0.0004490179 -0.0014670411 0.0029198381 0.0003263517 -0.0035219331 0.0032702152 -0.0018915901 -0.0011549798 0.0006175531 -0.0040444510 0.0041355799 -0.0101777718 -0.0079248823 0.0079981602 -0.0006201989 0.0036169430 -0.0050326663 0.0028610427 0.0012421718 -0.0023953796 0.0068537901 -0.0013757222 -0.0032145160 0.0032663480 -0.0041383969 0.0056309188 -0.0003493725 0.0026257966 -0.0007102053 0.0017396916 0.0030671966 -0.0012022609 -0.0002852356 0.0000159366 -0.0014131877 0.0065998234 0.0013124702 -0.0009949811 0.0004727998 0.0002532666 0.0050279061 0.0003893568 -0.0000500754 0.0061846906 -0.0012836667 0.0023637247 -0.0006420834 -0.0031332368 0.0044572847 -0.0027392172 -0.0018726317 0.0024259751 -0.0051567801 -0.0057884155 0.0059619371 -0.0089545606 0.0003954490 0.0019344238 0.0077870355 -0.0008761334 0.0040880810 0.0035415885 0.0002066108 0.0018391564 0.0092347806 -0.0014954002 0.0054868957 0.0034261676 0.0038964553 -0.0011987898 -0.0087820667 0.0036077060 -0.0013752216 -0.0080557167 0.0036406801 -0.0014428110 -0.0086419717 -0.0012517816 -0.0014515587 0.0000622476 0.0049227209 -0.0014410825 -0.0099543151 -0.0038271707 -0.0016339475 0.0037505487 0.0002794583 -0.0014378714 -0.0018049149 -0.0040327067 -0.0011960897 0.0056141287 -0.0011197349 -0.0013258711 0.0011671616 -0.0091342998 -0.0007605608 0.0147385236 -0.0363777273 0.0081870649 0.0585499426 -0.0470686248 0.0571061160 0.1203082144 -0.0421171839 0.0029676587 0.0559920457 -0.0893224104 -0.0374733392 0.0425083738 0.0339686298 -0.0104519363 -0.0691948663 -0.0063189092 -0.0073936051 -0.0592070728 0.0852930024 -0.0131990143 -0.0972368822 -0.0021537431 -0.0261390374 -0.1065183472 -0.0011302344 -0.0010920158 -0.0041657019 -0.0001356852 -0.0021115709 -0.0005107995 0.0001838846 -0.0021578767 -0.0008903666 -0.0000572534 -0.0017876724 0.0012112326 -0.0024706048 -0.0011154962 -0.0039537893 0.0007199112 -0.0021042951 0.0038865586 0.0019744764 -0.0026151466 0.0011179178 0.0023529194 -0.0026936455 -0.0018162758 -0.0003456577 -0.0022800704 0.0030243162 0.0030183135 -0.0027244661 -0.0021452491 -0.0000462346 0.0003295134 0.0023556302 -0.0056618218 -0.0029081954 -0.0051227189 -0.0030211237 0.0003385534 -0.0034264541 -0.0074497082 -0.0028088278 -0.0027097335 -0.0028776089 0.0031454657 -0.0058849640 0.0097442875 -0.0225381866 0.0198143045 -0.0073434304 0.0129663132 0.0023930480 -0.0028845438 0.0074226210 0.0061781421 0.0087631245 -0.0097655446 0.0112816883 0.0119007554 -0.0057149572 0.0153134069 -0.0154457087 0.0138205210 -0.0019343271 -0.0025941007 -0.0002351721 0.0069002546 0.0057334613 -0.0026145793 0.0127370356 0.0156172110 -0.0088728337 0.0175889693 -0.0304512123 0.0264738459 -0.0140026802 -0.0066163012 0.0029038097 0.0046406103 0.0076888351 -0.0084720632 0.0083752294 0.0080627802 -0.0063168873 0.0006214416 0.0036643803 0.0167237220 -0.0266998782 -0.0032300120 -0.0242661316 -0.0031684850 -0.0025037202 0.0020934552 -0.0238902933 -0.0049418087 -0.0218600012 -0.0061677865 0.0011684292 -0.0257475856 -0.0183859619 0.0041070680 -0.0120480180 -0.0244021332 -0.0044645515 -0.0035574692 -0.0115740786 -0.0037863374 -0.0244541168 -0.0036728019 -0.0068391512 -0.0369391751 -0.0348851844 0.0032985884 -0.0081369162 -0.0300202423 -0.0054365055 0.0097449251 -0.0048209508 -0.0061983929 0.0187339261 -0.0280339266 -0.0142399381 0.0124217766 0.0086031060 -0.0095339762 0.0128389156 0.0069410652 -0.0027477147 -0.0038244296 0.0028589651 0.0210862777 0.0519016714 0.0402743851 0.0137452017 0.0585629663 0.0300585114 -0.0239815684 0.0731681687 0.0207864620 0.0621150460 0.0605562076 -0.0500224517 -0.0660114304 -0.0274657973 -0.0819632842 0.0157676595 -0.0736472493 0.0836424160 -0.0060242510 -0.1330731929 -0.0106698677 0.0188263937 0.0363738685 0.0008237395 -0.0369446991 -0.0326107519 -0.0182736435 -0.1589492186 -0.0812400331 -0.1615108686 -0.0720671574 -0.0219923613 -0.1835555117 -0.1272216817 -0.0789245400 0.0794841250 0.0051767283 -0.2335723907 0.2474816320 -0.2105080215 0.0091783523 0.1061556624 0.1879272352 -0.1250186055 0.0618652963 -0.2565256057 -0.0880207083 0.0540948709 -0.0169687131 -0.3581674743 0.0187555597 0.1513575875 -0.2109880796 -0.0511577394 -0.0077796612 -0.0156166699 0.0513796983 -0.1006333787 -0.1224785162 0.0089556221 -0.0499201677 -0.0138194293 -0.1287354138 -0.0014906276 0.0023883339 -0.0025285711 -0.0040180863 0.0043179663 -0.0013303607 -0.0024811172 0.0047765507 0.0031978700 0.0003532127 0.0048664323 0.0040761801 0.0017947882 0.0054582449 0.0024862098 0.0014799499 0.0037741302 -0.0012747997 -0.0068587299 0.0039504556 -0.0024019740 -0.0041768795 0.0039528098 0.0057368783 0.0005471451 0.0010225871 0.0002129831 0.0040709330 0.0068014181 0.0031602830 0.0040365930 0.0030792273 -0.0028367897 -0.0052457356 -0.0042880036 0.0018555909 -0.0018626887 -0.0001930288 -0.0027041828 0.0002103664 0.0023885032 -0.0043352313 0.0009175108 0.0006743154 -0.0026249982 -0.0007439918 -0.0015375097 0.0010890327 -0.0082893541 -0.0049156432 0.0034753765 -0.0005843690 0.0029207832 -0.0047334399 0.0004268448 0.0060146211 -0.0021588557 0.0035796577 0.0009979955 -0.0041821403 0.0002421433 -0.0012437373 0.0012779056 -0.0048388506 -0.0022118649 -0.0013451721 0.0060846106 -0.0001795239 -0.0040852673 -0.0055180531 0.0049799168 0.0000415287 0.0074349176 0.0096138157 -0.0004527185 0.0018991348 -0.0022867494 0.0018644718 0.0012087354 -0.0021622258 0.0034128818 0.0030629502 -0.0003501682 0.0000759396 0.0010445178 0.0021291684 -0.0023153823 0.0047183524 -0.0007640031 -0.0012612681 0.0005559112 0.0035637465 -0.0052489098 0.0000630628 0.0000764806 0.0028782698 -0.0004586516 0.0024243447 -0.0011266596 -0.0014866456 0.0003497262 0.0033053693 -0.0024760029 0.0044501349 -0.0032877230 0.0052156076 -0.0029372090 -0.0029155871 0.0042449903 -0.0027700393 -0.0041845242 0.0066711309 -0.0013820012 -0.0023304672 0.0028540063 0.0004700305 0.0033268096 0.0090985421 -0.0016478340 -0.0030053298 0.0016902675 0.0015595981 0.0065162131 0.0022395656 -0.0012673577 -0.0014266761 0.0000164895 0.0007684332 0.0050767865 0.0007278802 -0.0011297181 -0.0015522492 -0.0037325258 0.0025676601 0.0103507646 0.0066736982 -0.0315961169 0.1046912825 -0.0158564439 0.0346862812 0.1684805769 0.0335413458 -0.0958936868 0.0259116553 -0.0164510340 -0.1108463819 0.1712473029 -0.0093779550 0.0718803152 -0.0308811183 -0.0335774994 -0.0803730316 -0.1723803485 -0.0639719142 0.2499523148 -0.1016189759 0.0522180214 0.0493620380 0.1161486309 -0.0230371149 0.0703451172 -0.0677748062 -0.0113520174 0.0674626774 -0.0403820853 0.0104637725 0.0620619161 -0.0127030093 0.0584520046 0.0100967762 0.0180809676 0.0235372133 0.0536004054 -0.0175173656 -0.0080799275 -0.0433408651 0.0093425248 0.0412893055 -0.0112739901 -0.0314072261 -0.0210256669 -0.0418795944 0.0224716844 -0.0403091517 -0.0510304607 0.0590802031 -0.0475631859 -0.0410457226 0.0471671314 -0.0135400266 -0.0479727156 0.0146689880 0.0427339164 0.0702600805 0.0015715034 -0.0405112068 0.0061023210 0.0207517396 -0.0551323593 0.0255670002 -0.0188277699 -0.0635329843 -0.0131001921 0.0626242509 -0.0577971268 0.0734041146 -0.0530337365 0.0246685995 -0.0822462559 0.0249609388 0.0034262925 -0.0383300838 -0.0051252852 -0.0426294873 0.0778242408 -0.0682342780 -0.0488640772 0.0109893087 -0.0629759197 0.0436592434 -0.0357837269 0.0274770052 -0.0010740353 0.0417361171 -0.0274982766 -0.0223874647 0.0282956576 -0.0722999312 -0.0571307342 -0.0055842362 -0.0753168820 0.0988476218 -0.0833860562 0.0920979779 0.0121991170 0.0551483121 -0.0141683112 -0.0569275981 0.0734067860 -0.0591307496 -0.0518361768 0.0137697755 0.0024841268 -0.0498890683 0.0090891330 0.0029523463 -0.0418050317 -0.0465004785 0.0349931149 0.0001812027 0.0371678008 0.0336158180 -0.0234547607 -0.0288401953 0.0758611198 -0.0298023392 -0.0502333659 0.0162841220 -0.0028006820 -0.0102048216 0.0055963903 -0.0032587967 0.0188600554 0.0686805610 -0.0349434554 -0.0378691586 0.1145923363 -0.0435866426 -0.0620492006 -0.0074460420 0.0093853997 -0.0046004639 -0.0315264022 0.0021168067 0.0438251626 0.0898799154 0.0072462776 0.0823791959 0.0222587303 0.0769594683 -0.0468412788 -0.0619837632 0.0151545088 -0.0344116268 -0.0516264579 -0.0494782060 -0.0622308323 0.0515654943 0.0030151389 0.0014236649 -0.0075291696 0.0032789483 -0.0053680708 -0.0092753965 0.0255067336 -0.0129596449 -0.0067460045 0.0326999340 -0.0111647227 0.0157142303 -0.0585626126 0.0157352792 0.0343260219 0.0335108664 0.0215931066 0.0139322592 -0.0000642949 0.0185241168 -0.0399878280 0.0062320635 -0.0082659876 -0.0080750157 -0.0006038328 -0.0037430555 -0.0165935934 0.0190998644 0.2230935336 0.0246323483 -0.3038409748 0.0276973414 0.0749639179 0.0041256449 -0.1908782889 0.0150315001 0.0587308742 0.0893420599 -0.0247057885 0.0564658130 -0.0459822392 -0.0075433756 -0.0256788084 0.0391187709 0.0755822683 0.0142125666 0.0189267692 -0.0559488817 0.0308708495 0.0392158431 -0.1138551962 -0.0864606469 0.0491132943 -0.0249627681 -0.0040754839 -0.0061222795 -0.0280439829 -0.0055065912 0.0067858871 -0.0125748332 0.0019734434 -0.0072833850 -0.0155061986 -0.0378635228 0.0727060180 -0.0675601032 -0.0409666361 0.0164469883 -0.0118591596 -0.0002776385 -0.0549128333 0.0654776011 0.0215299230 -0.0846815514 0.0889654609 0.0284784127 -0.0395838144 0.0430787346 -0.0184705689 0.0512889129 -0.0470796615 -0.0790481498 0.0177918212 -0.0287927962 -0.0052811648 -0.0690777334 0.0824555405 -0.0170399838 -0.0266121479 0.0324501054 0.0637635639 -0.0420801836 0.0620726174 -0.0306188864 0.0973237481 -0.0819666939 -0.0471097345 -0.0263103721 0.0151254614 0.0067229547 0.0297430257 -0.0553820252 0.0386375661 0.0461354934 -0.0741250432 0.0396384304 0.0130408247 -0.0463441406 -0.0114789424 -0.0476213666 0.0262572618 -0.0852698675 -0.0286521938 0.0344814372 0.0010132565 0.0510239426 -0.0793676917 0.0050129095 0.0161762878 -0.0149361145 0.0732079887 0.0129222946 -0.0657980927 -0.0128575491 -0.0778639178 0.0538981795 -0.1107310033 -0.0051248161 0.0057305065 0.0292301464 0.0346628580 -0.0273945697 -0.0674973239 0.0295222919 0.0131773725 0.0375931805 -0.0385799162 0.0363206528 0.0699180661 0.0252090328 0.0687759994 0.0955055133 0.0135742318 0.0684680617 0.0538834948 0.0217445669 0.0431749519 0.0018303816 0.0194119302 -0.0608842034 0.0526780041 0.0220619424 0.0505377098 -0.0511627719 0.0154764840 -0.1329956039 0.0866781170 0.0106307996 0.0377823432 0.0199054567 0.0158738651 -0.0661697084 0.1005456398 0.0070369893 0.0416561328 -0.0227204128 0.0142775445 -0.1428093166 0.0568091102 -0.0191050513 -0.0626545547 0.0360603912 -0.0233058683 -0.0484177287 0.0358203377 -0.0276886373 -0.0335357271 -0.0067223971 -0.0314848042 0.0437713801 0.0297876620 -0.0257406120 -0.0298721084 -0.0447664545 -0.0289679190 0.1050600865 0.0341284363 -0.0302811488 -0.0325573631 -0.0044452135 -0.0314032098 0.0334273092 0.0442259191 -0.0311344918 -0.0322447256 -0.0316348288 -0.0274028770 0.0807066942 0.0756447608 -0.0893372708 0.0074033582 0.0857245237 -0.1048386631 0.0044665979 0.0813949153 -0.1518048687 -0.0578648943 0.1247966142 -0.0914196801 0.0804589592 -0.0351486709 0.0673802642 -0.0187830412 -0.0977483930 0.0765071327 0.0030064645 -0.0383626630 0.0719783745 -0.0194438423 -0.0086687470 0.1071468838 -0.0457463772 0.0275678398 -0.0197599648 0.0838862123 0.0145501279 -0.0093968677 0.0393594260 -0.0020459950 -0.0053820468 0.0201934002 -0.0228816403 0.0111657666 -0.0245680220 0.0126163539 -0.0099438395 0.0423283860 0.0119740577 0.0311758465 -0.0308250159 -0.0154978145 0.0227388221 0.0002297668 -0.0022320337 0.0346281301 0.0120323715 0.0225410617 0.0339999382 -0.0346898226 -0.0013200153 0.0344606751 0.0128906634 0.0199782271 0.0131831365 -0.0260005450 0.0209445664 -0.0015830597 0.0327214576 0.0434374189 -0.0059738173 0.0012274604 0.0794708171 0.0068848990 0.0152924902 0.0423478641 -0.0091122521 0.0002616568 -0.0796116838 0.0564852158 -0.0438874966 0.0472378925 -0.0897810851 0.0101957784 0.0140644995 -0.0445334820 -0.0207835697 -0.0612153257 0.0825136114 -0.0783136938 -0.0628088598 0.0224359506 -0.0781864233 0.0664060554 -0.0592845112 0.0178156065 -0.0033361075 0.0312575590 -0.0448288848 -0.0311227982 0.0303816163 -0.0779656458 -0.0722176228 0.0189470450 -0.0875535802 0.1445330546 -0.1255578057 0.0909917083 0.0120365510 0.0322590950 -0.0321726871 -0.0820494020 0.0706787072 -0.0545441365 -0.0808521572 0.0067568734 0.0128276060 -0.0781971499 0.0093366508 -0.0036747379 -0.0881220351 -0.0556725876 0.0499691674 0.0058939708 0.0329487505 0.0503471793 -0.0611163094 -0.0294791246 0.1112516079 -0.0705229787 -0.0538285169 0.0116430695 -0.0181425047 -0.0107733285 -0.0004653322 -0.0112602508 0.0183348441 0.1060321110 -0.0828983115 -0.0362667987 0.1667608325 -0.0863929421 -0.0773294030 -0.0271783508 0.0043819602 -0.0081858908 -0.0556658894 0.0078525016 0.0449162243 0.1440253694 0.0404137077 0.0738720725 0.0395408248 0.0967415616 -0.0730456389 -0.0640088675 0.0514012572 -0.0547083075 -0.0568821415 0.0308717423 0.0361848933 -0.0293926018 0.0123882443 0.0186086870 -0.0034868304 0.0098298789 0.0098905453 -0.0058343468 0.0171528434 0.0032642368 0.0005621295 0.0201147028 0.0036921122 0.0260509466 -0.0395823427 -0.0113649666 0.0241333262 0.0386096210 -0.0010732453 -0.0084416705 -0.0247967987 0.0075354682 -0.0249701970 0.0192448789 -0.0057075959 -0.0018278081 0.0089265615 0.0021475250 -0.0145475285 0.0101262830 0.0973054591 0.0292560490 -0.1997663426 -0.0012744195 0.0107892157 0.0015550036 -0.1627492506 0.0203677247 0.0287851135 0.0194521006 -0.0487827138 0.0785430354 -0.0319582573 -0.0177051700 0.0291508375 0.0014503829 0.0108371100 -0.0518593243 0.0162025526 -0.0343560325 0.0060856307 -0.0095006689 -0.0979183346 -0.0891727550 0.0294609172 -0.0143433852 0.0271007154 0.0070560165 -0.0165319158 -0.0090477121 -0.0090250629 -0.0054691889 -0.0011382719 0.0161540630 -0.0315136827 0.0355391213 -0.0521203049 0.0718533289 0.0641480887 -0.0428336912 0.0291989685 0.0227709672 -0.0092089073 -0.0669026715 -0.0237933280 0.0025105503 -0.0899289231 -0.0466894903 -0.0219156367 -0.0503190192 -0.0177355395 -0.0478775375 0.0415717976 0.1184329519 -0.0432920553 0.0523677301 0.0477619643 0.0060988337 -0.1063455657 -0.0058900180 0.0084784094 -0.0175298382 -0.0956462177 -0.0288508892 -0.0726402610 -0.0467342484 -0.0585423108 0.0775847743 0.0310252587 0.0131739951 -0.0066382081 0.0008922356 -0.0213231351 0.0328644724 -0.0150023279 -0.0337037940 0.0429929652 -0.0168320115 -0.0141266394 0.0260412098 0.0129365053 0.0231896440 -0.0154002816 0.0528585360 0.0120840433 -0.0176543624 0.0019187804 -0.0323540340 0.0440742152 0.0093522825 -0.0109181936 0.0089170603 -0.0358824318 -0.0120825692 0.0369236627 0.0175870955 0.0404649669 -0.0290845908 0.1022559735 0.0386663106 0.0120646357 -0.0899046329 -0.0124146088 0.0603834152 0.0567062422 -0.0096206493 -0.0101017168 -0.0064617721 0.0215085084 -0.0204787644 -0.0536654383 0.0121774294 -0.0639960482 -0.0585563436 0.0152483066 -0.0789017745 -0.0533336001 -0.0016659793 -0.0352012220 0.0003143448 -0.0226401155 0.0554198014 -0.0666428143 0.0016210530 -0.0311804609 0.0376934184 -0.0345990055 0.1290156175 -0.0434064549 0.0000304370 -0.0575638103 0.0055543543 -0.0235082443 0.0466858956 -0.0400234722 -0.0001176050 -0.0666697132 0.0513266752 -0.0417624126 0.1151263730 -0.0414974092 0.0268738231 0.0415349728 -0.0284976726 0.0285244747 0.0446202015 -0.0465703469 0.0215863710 0.0354216401 -0.0109616747 0.0124842322 -0.0206248278 -0.0608000818 0.0222026211 0.0378798538 0.0043105694 0.0057054619 -0.0526673071 -0.0110439684 0.0214470603 0.0162603967 0.0128473094 0.0098603856 -0.0398317060 -0.0006944648 0.0205315287 0.0093261957 0.0470293707 -0.0026911395 -0.0917208693 0.0967632026 -0.1045939322 0.0254346528 0.1118018037 -0.1221073631 0.0312690116 0.0988591182 -0.1892988721 -0.0601762145 0.1562206857 -0.1104725096 0.1179668510 -0.0287519428 0.0784894489 -0.0369526740 -0.0806936943 -0.0208402431 -0.1217075978 -0.0862544207 0.2078927712 -0.0793358057 0.0424264350 0.0956710960 0.0557288175 -0.0450047788 -0.0004668660 -0.0991552139 -0.0677501097 -0.0060703017 -0.1195957153 -0.0409729955 -0.0138256790 -0.0634796208 0.0131915049 -0.0127546843 0.0583757368 0.0014840317 -0.0238611993 -0.0109374518 -0.0010114771 -0.0063439755 -0.0505831561 -0.0383535584 -0.0003297819 0.0506434323 0.0208075291 -0.0024078141 -0.0808998341 0.0468939998 0.0052733363 -0.1404328655 0.0448396357 -0.0010871035 -0.1314722166 -0.0031798971 -0.0196487925 -0.0370631795 0.0128002738 -0.0266911599 -0.0082706699 0.0216016324 -0.0332642495 -0.0014074613 0.0565888309 -0.0509025315 0.0542542797 0.0074271679 -0.0242595731 0.0003365439 -0.0177034321 0.0096242872 -0.0048015481 0.0038473084 -0.0054673754 -0.0025149570 0.0011114220 -0.0025788481 -0.0044678320 -0.0092956262 0.0106310797 -0.0078492895 -0.0085014611 0.0054511862 -0.0091824784 0.0104225110 -0.0076421988 0.0014212582 0.0008946848 0.0022307237 -0.0050400117 -0.0032858231 0.0029386118 -0.0069678154 -0.0099165082 0.0076487101 -0.0097809739 0.0210431757 -0.0165946927 0.0098358353 -0.0007668079 0.0041481953 -0.0064794880 -0.0175033818 0.0131575753 -0.0078514854 -0.0185229635 0.0106763789 -0.0023799765 -0.0178484243 0.0085848019 -0.0015049669 -0.0154950567 -0.0055037809 0.0073235123 -0.0013904795 0.0085797090 0.0090799845 -0.0077606268 -0.0057842275 0.0187281860 -0.0101632613 -0.0095952599 0.0037072560 -0.0030926503 -0.0015380691 0.0018001979 -0.0006642030 0.0018859541 0.0181175137 -0.0090827179 -0.0098101457 0.0282169938 -0.0065769740 -0.0185982371 0.0014312965 0.0027036401 -0.0038470885 -0.0069440534 0.0038087939 0.0031862123 0.0241017333 0.0018637168 0.0175211258 0.0068379566 0.0165774431 -0.0133400002 -0.0039376581 0.0119163102 -0.0149261266 -0.0019722748 0.0607209730 0.0500502549 -0.0977161817 -0.0002409695 -0.0014031581 -0.0031333554 0.0023561464 -0.0007403374 -0.0020854945 0.0106508606 -0.0017275003 -0.0039540537 0.0183432398 -0.0035361168 0.0085195839 -0.0409294915 0.0185892278 0.0211497095 0.0215586573 -0.0004617172 0.0075866653 -0.0047684798 0.0050119284 -0.0234397528 0.0046673367 -0.0028793054 -0.0020455405 -0.0047283733 -0.0058136432 -0.0088979971 0.0108012070 0.1530227385 0.0157563236 -0.2049323725 0.0269231891 0.0466140875 0.0012874860 -0.1204404816 0.0081882638 0.0234587261 -0.0093638268 0.0200066350 0.0183434504 0.0200380906 0.0141947373 0.0183089331 0.0005039747 -0.0093833660 -0.0136623810 0.0099004002 -0.0350846869 0.0141863316 0.0004368337 -0.0684890137 -0.0486599536 0.0239544058 -0.0139039819 -0.0049015363 -0.0060664457 -0.0105038819 -0.0127550359 -0.0067913879 -0.0043393787 -0.0037614626 -0.0069888195 -0.0175437856 -0.0445934911 0.0483836926 -0.0870297936 -0.0665678551 0.0227441584 -0.0307429756 -0.0156368042 -0.0058347405 0.0853282333 0.0519008766 -0.0025273766 0.1113742073 0.0690359468 0.0398682685 0.0587053025 0.0289834217 0.0694469962 -0.0583891886 -0.1256222753 0.0145533370 -0.0527835438 -0.0558030764 -0.0226181564 0.1402041361 0.0373896827 -0.0048695258 0.0186943512 0.1217734745 0.0575074138 0.0791776330 0.0668014734 0.0956530531 -0.1182946144 0.0999950595 0.0100808133 -0.0253381250 0.0373861422 -0.0148202036 0.1240716410 -0.0382826685 0.0046699871 0.1570200788 -0.0692302404 0.0552256720 0.1010997027 -0.0264112451 0.0814061367 -0.0477161808 0.1796586434 -0.0210011731 -0.0620878320 0.0892787722 -0.0526263419 0.1924534657 -0.0171669409 -0.0018914570 0.0190840481 -0.1384942257 0.0966680038 0.1373357485 -0.0746640023 0.1269089039 -0.1157238107 -0.0983836877 -0.0403877907 -0.0183333686 0.1456939758 0.0233808262 -0.0820467950 0.1495060100 -0.0877541553 -0.0469311268 -0.1505822461 0.0743583209 -0.1061393369 0.0178525004 -0.0176506391 0.0623000688 0.0268586719 -0.0167358227 0.0866072291 0.0299989186 -0.0135685551 0.0774167078 -0.0253232400 0.0051005830 -0.0136087074 0.0525348022 -0.0182995026 0.1056697170 -0.0442790661 0.0147247490 -0.0562638248 -0.0039610967 -0.0047327215 0.0474011256 -0.0593479300 0.0103816901 -0.0545529764 -0.0133932761 -0.0021293282 0.0528238113 -0.1155333482 0.0245209953 -0.1441802378 -0.0714133795 0.0054304230 0.0920645042 -0.0571374780 0.0021264940 0.0687179854 -0.0440477607 -0.0023486955 0.0374639755 0.0337465716 -0.0131559508 -0.0992359583 -0.0441844064 -0.0015995647 0.0395340827 0.1052030610 -0.0216296615 -0.2194413491 -0.0694758068 0.0016472008 0.0880893575 0.0006248955 -0.0086780775 -0.0429255369 -0.0918732135 0.0033666264 0.1327645999 0.0341912849 -0.0144373167 -0.1003502467 0.0080998425 -0.0177346095 0.0018222933 0.0112199158 -0.0200620880 0.0054043303 0.0062609576 -0.0291887823 -0.0085944564 0.0148930187 -0.0187303231 0.0128717950 -0.0149954747 0.0235620804 -0.0103826816 -0.0425510247 0.0458948139 0.0165704031 -0.0056795141 0.0052659889 -0.0048012070 -0.0129317523 0.0407693424 -0.0401596545 0.0075066374 -0.0107071977 0.0111341140 0.0147901513 -0.0106394958 0.0196524097 0.0078039815 -0.0086859239 0.0074695750 -0.0071374680 -0.0020614515 -0.0121201046 -0.0050540570 -0.0051814192 -0.0067521858 -0.0014374499 0.0047790372 0.0058598418 -0.0028491075 -0.0002812523 0.0002873142 0.0024458763 0.0038947345 0.0060389869 0.0035054447 0.0045643811 0.0059600220 0.0046614412 0.0037560449 0.0043111324 -0.0045453672 0.0116604496 0.0029376780 -0.0087951812 -0.0059102525 -0.0073213558 -0.0045794010 0.0026399230 -0.0046880932 -0.0190034731 0.0016604167 -0.0159191658 -0.0043069805 -0.0023264520 0.0032667148 0.0070664215 0.0007290193 -0.0029725937 -0.0147326382 0.0375252078 -0.0123159041 -0.0047256665 0.0180196258 0.0010420488 0.0059445850 -0.0257555210 0.0218995783 0.0107345213 0.0036584569 0.0207982751 -0.0087340743 0.0052977821 -0.0052663451 0.0002100858 -0.0204116937 0.0135452274 0.0051285680 -0.0117269264 0.0295616604 0.0104215962 0.0139738657 0.0237272550 -0.0191616930 0.0147978683 -0.0263769252 -0.0028474959 -0.0275470904 0.0093232904 0.0097256002 -0.0101973235 0.0050926615 0.0115984491 -0.0030929732 -0.0027529090 0.0122418005 -0.0085111911 0.0059474746 0.0208799405 0.0040147346 -0.0089363849 -0.0064240662 0.0036145711 -0.0127986886 0.0204844779 -0.0065665990 -0.0180628663 0.0200274047 0.0006287382 -0.0010333463 0.0014962087 0.0059375061 -0.0022688789 0.0079908513 -0.0100714258 -0.0186494012 0.0289643168 -0.0116761232 -0.0261990232 0.0307116593 -0.0038160659 0.0105394251 -0.0060041541 0.0103089079 0.0066276610 0.0078965093 -0.0190725046 -0.0241997299 -0.0209977163 0.0084943122 -0.0137903729 -0.0204282649 0.0068908111 0.0434622473 -0.0123365500 0.0003110180 0.0443789800 0.0075977579 0.0047061674 0.0011921681 -0.0168480723 -0.0128233070 -0.0114347564 -0.0003648490 -0.0116139719 -0.0037405487 0.0309734877 -0.0124733039 -0.0125892089 0.0507181991 -0.0101118771 -0.0047466010 -0.1130715637 0.0682774668 0.0369216937 0.0289572636 0.0199197771 0.0497946077 0.0216225623 0.0102418339 -0.0540501886 -0.0043567634 -0.0050403736 -0.0096406175 -0.0288983894 -0.0320406037 -0.0207229806 0.0427881367 0.4730638905 0.0210295511 -0.5820908115 0.0903125800 0.1373172446 0.0114552445 -0.3171585385 -0.0150204693 0.0715979362 0.0395690562 0.0928946216 -0.0298651719 0.0201489906 0.0488358325 -0.0068565864 0.0305488944 0.0703450055 0.0302987281 0.0129079035 -0.0731175572 0.0499989665 0.0241009595 -0.1222610283 -0.0562366896 0.0419570036 -0.0382274645 -0.0518955373 -0.0378926129 -0.0177220582 -0.0415457207 -0.0266061790 -0.0125412404 -0.0135564994 -0.0530102603 -0.0383029963 0.0088993814 -0.0146606843 0.0140671269 0.0065712558 -0.0035964387 0.0051313974 -0.0030376934 0.0117474519 -0.0105598313 -0.0103518646 0.0167890817 -0.0159890951 -0.0084259081 0.0061601971 -0.0074915211 0.0023034729 -0.0127374829 0.0103776044 0.0126752234 -0.0059755064 0.0084456535 -0.0002192872 0.0139751455 -0.0150691629 -0.0049183846 0.0042411141 -0.0050031359 -0.0133204269 0.0073877068 -0.0104138843 0.0037932116 -0.0226093335 0.0190519468 0.0048872466 0.0041300835 -0.0008530392 -0.0002691269 -0.0059361734 -0.0029471206 0.0000813902 -0.0130320671 -0.0017842418 0.0051104655 -0.0109844589 -0.0013192473 0.0106353580 -0.0016688607 0.0005723240 0.0052340372 0.0102733146 -0.0015898143 -0.0039743314 -0.0045588011 -0.0064839205 0.0058247866 -0.0002101920 -0.0011398097 0.0079696381 -0.0145476672 -0.0025983357 0.0165432486 -0.0005849314 0.0026737309 0.0124385541 -0.0008925175 -0.0000198085 -0.0144601691 -0.0078689967 0.0070273666 0.0127395480 0.0171464185 -0.0047585531 0.0140501013 0.0035577899 -0.0004750372 -0.0030641358 -0.0045177248 -0.0131397434 -0.0082510967 -0.0025941531 -0.0168877955 -0.0016700797 -0.0044962309 -0.0122707531 0.0064766797 -0.0057954793 0.0020662688 -0.0025555163 -0.0043247041 -0.0141186511 0.0123053294 -0.0059772879 0.0109037029 -0.0035460331 -0.0042493884 -0.0099279147 0.0070533184 -0.0057645678 0.0064975702 -0.0034108205 -0.0040620901 -0.0095634585 0.0151546157 -0.0059960475 0.0206203351 -0.0024043410 0.0007990456 0.0043279372 -0.0002742516 0.0016163938 0.0047345515 -0.0000389017 0.0057392960 0.0067064308 0.0002267743 0.0099068775 0.0042872898 0.0029326583 0.0051146481 0.0081568783 0.0006728098 0.0114999611 0.0056840667 0.0011499011 0.0058879864 -0.0025809444 0.0033881537 0.0094535515 -0.0024885357 -0.0005022009 0.0060663098 -0.0094189701 0.0058257565 0.0105873050 -0.0081820109 -0.0364753931 -0.0036894319 -0.0063272658 -0.0267167232 -0.0087940697 0.0100298481 -0.0586491114 0.0007256995 0.0091476714 -0.0465917241 0.0024963337 -0.0286091208 -0.0213528139 0.0102891553 0.0157691027 -0.0545743626 0.1906740450 0.1949662944 0.0619024298 -0.1855764981 0.0828499787 -0.0809606825 0.0559093779 -0.1770440399 0.0217486893 -0.0415566143 -0.0259812520 0.0729615524 -0.0365210182 0.0230927229 0.0495887977 -0.0296707306 -0.0133302855 -0.0055316934 -0.0171099925 -0.0340975948 -0.0276608827 -0.0148597086 -0.0560182566 -0.0206140805 0.0056430048 0.0548962674 -0.0095316902 -0.0081472303 0.0407585393 0.0428555631 -0.0042572107 -0.0100364536 0.0285322055 0.0163443745 -0.0034387553 0.0797397862 -0.0040103136 -0.0586763824 -0.0394185319 0.0255205327 0.0486382902 -0.0340344319 -0.0098345305 -0.0216332564 -0.0701873990 0.0265934508 0.0184339971 -0.1229789443 0.1121175761 -0.1534817527 -0.0967745184 -0.0575902217 0.1457818361 -0.0225775422 0.0246253151 -0.0442659714 0.0470615151 -0.0305792259 0.0707926204 0.0097477303 0.0029244136 0.0478911736 -0.0748415745 0.0534943904 -0.0328392335 -0.0566702330 0.0665583787 -0.0075988133 0.0399232345 -0.0347064502 0.0630736464 -0.0462481939 0.0318661659 0.0150552347 -0.0429543656 0.0409472555 0.0039794217 -0.0723793714 0.0683786507 -0.0204377685 0.1166877291 -0.0974460416 0.0969272080 -0.0428683871 0.0453305478 0.0209752413 -0.0328299954 0.0666014627 -0.0666439255 -0.0021826567 0.0523713117 -0.0235457768 -0.0164734190 0.0587962875 0.0074885857 0.0928189470 -0.0625471092 0.0011668144 -0.0633483475 0.0737200582 -0.0479774265 0.1025697155 -0.1039364884 -0.0190657521 0.1160287324 -0.1065484830 0.0232651964 0.0315299930 -0.0296297674 0.0033955519 0.0125554381 -0.0212784053 -0.0429431021 0.1381659783 -0.1375990523 -0.0321074753 0.1282527071 -0.1217820575 0.0331000984 0.0036521301 -0.0055141987 0.0223328962 -0.0176322714 0.0045691584 -0.0623083572 -0.1764400250 0.2017400105 -0.0780216821 0.0275083344 -0.0174144772 0.1150441197 -0.0260457482 -0.0567685220 0.1456175006 0.0498267334 0.0510672126 -0.0345425288 0.0220681863 0.0037724188 0.0139311978 0.0173771862 -0.0110871281 0.0145811786 0.0334433115 -0.0445057849 0.0423800613 -0.0414872771 -0.0263650810 -0.0377136438 0.0564594543 0.0287102130 -0.0251410988 -0.0571550351 -0.0152339647 -0.0270543353 0.0335016118 0.0034503419 0.0234605063 0.0003482295 0.0217011387 -0.0230330140 0.0066035895 0.0151723497 -0.0152685534 0.0351204294 -0.0438612561 -0.0139556612 0.2238853683 0.0156017232 0.0552809426 0.0327977917 0.2203373789 -0.0818895179 -0.0525349791 -0.0338078193 0.0024553936 -0.0831200620 0.0062472485 -0.0202447507 -0.0468185012 -0.0186066647 -0.0385094925 0.1192477982 -0.0177138576 0.0259957552 -0.0084449053 0.0716647276 0.1216548480 0.0952223167 -0.0145538127 0.0149803187 -0.0440444386 -0.0028255679 -0.0430088986 0.0347495435 0.0683894373 -0.0256793325 0.0359170100 -0.0249692915 0.0253628756 0.0357393260 -0.0717077461 0.0148593141 -0.0005043809 -0.0570824630 0.0344462682 -0.0367953608 0.0474058295 0.0210876447 -0.0406178837 0.0972015679 -0.0000848438 0.0018955946 0.0641045216 -0.0011047749 0.0395294794 -0.0339232306 0.0072732154 -0.0107666096 -0.1131830890 0.0476151125 -0.0566886374 0.0587521308 0.0291903805 -0.0279288812 0.0181771041 -0.0035104689 0.0236499302 0.1023176814 -0.0034044730 0.0698337127 -0.0587056185 0.0060321743 0.0298185799 0.0386446272 -0.0309884207 -0.0257012893 -0.0283734498 0.0101450523 -0.0562911315 -0.0519954546 0.0295321526 -0.0253307702 -0.0187980094 0.0140480087 0.0288901470 0.0458473516 -0.0247914115 0.0485713791 0.0673670065 -0.0426964978 -0.0289345269 -0.0449951151 0.0241445911 -0.0311735207 -0.0036916287 0.0076276438 -0.0313044209 -0.0325268466 0.0186369088 0.0417749155 0.0734261326 -0.0447246510 -0.0320230685 -0.0467078599 -0.0024851803 -0.0013730127 -0.0359978747 -0.0084881386 0.0009142069 0.0220642275 -0.0052144503 -0.0251545752 0.0381080263 -0.0131299777 0.0427108048 -0.0272604556 -0.0372426516 0.0217466958 -0.0184679396 -0.0414897036 0.0531346313 -0.0373226980 -0.0232143729 0.0533789478 -0.0497796315 -0.0343816138 0.0546093175 -0.0375037252 -0.0007079004 0.0566158445 -0.0534413437 -0.0244093354 0.0375714090 -0.0406114556 -0.0417587293 0.0406726990 -0.0469833373 -0.0427182788 0.0509438094 -0.0417692129 -0.0396145054 0.0398601338 -0.0425965532 -0.0417972341 0.0014709691 -0.0118639779 0.0599581382 0.0124805748 -0.0092876832 0.0448216253 0.0330130575 0.0138818053 0.0558255440 0.0510507676 0.0339006045 0.0167087702 0.0550904929 0.0098792207 0.0608187710 0.0733625027 0.0412332072 -0.0073832886 0.0146130067 0.0124946424 0.0266237414 0.0442936994 0.0349991836 0.0069927166 -0.0016780654 0.0142141250 0.0062422525 0.0546502095 0.0476879324 -0.0244785450 0.0218020959 -0.0158563576 0.0285464478 -0.0126538769 0.0369305587 0.0358868509 0.0737866527 -0.0287202157 -0.0102847847 0.0047983476 -0.0678664544 0.0718251861 -0.0159571188 0.0523967648 -0.0362548591 -0.0821640347 0.0036645083 -0.0681465719 -0.0165695471 0.1108489553 -0.0690730827 0.0094047858 0.0685743268 -0.0216955611 -0.0082501587 -0.0093247379 0.0042583593 -0.0169307449 -0.0165173564 0.0107682313 -0.0135336193 -0.0174194812 0.0119828810 -0.0129427445 -0.0050224161 0.0055246836 -0.0058626674 -0.0122736325 0.0033171114 0.0066886713 0.0058143809 -0.0093673801 -0.0041065168 -0.0031642300 -0.0109298805 -0.0074664015 0.0070469184 0.0031573081 -0.0053398066 0.0031566775 0.0082674304 -0.0127756105 0.0063174016 0.0187472585 0.0096066744 0.0167337672 -0.0143497914 -0.0049492451 -0.0148693703 -0.0087714691 0.0242290292 -0.0049649768 -0.0167472602 0.0200909054 -0.0455252528 0.0375133811 0.0499830617 0.0113174362 -0.0533437012 0.0013169038 -0.0190312972 0.0070943722 -0.0334537174 0.0695130657 -0.0307893630 -0.0095233446 0.0319397655 -0.0049704072 0.0127172768 -0.0372976304 0.0348544969 0.0181851495 0.0062040857 0.0295290951 -0.0052540774 0.0053949824 -0.0086509131 0.0134136260 -0.0369744499 0.0234939086 0.0139084206 -0.0203244374 0.0447126745 0.0144857357 0.0264805907 0.0324497169 -0.0203679803 0.0189984134 -0.0399387550 0.0109999207 -0.0474581012 0.0188795255 0.0050225038 -0.0089213965 0.0033420403 -0.0084658360 0.0473878826 -0.0262173513 -0.0023792535 0.0229583500 -0.0050468651 0.0508794891 -0.0763016893 0.0298559434 -0.0647792175 0.0937034300 0.0028528392 0.0819597742 -0.1140386296 0.0473245627 0.0821850310 -0.1250392762 0.0500784443 0.0241586932 -0.0387900809 0.0311819199 0.0075407874 -0.0071777501 0.0237970672 0.1155086806 -0.1636809740 0.0659534302 0.1004488688 -0.1478599313 0.0550570330 0.0200094304 -0.0305768333 0.0263459106 -0.0153056227 0.0234535245 0.0162533398 -0.1633140941 0.2368968740 -0.0311102518 -0.0222040130 0.0040002598 0.0592351900 0.0032095291 -0.0047700938 0.0562394219 -0.0124539625 -0.0092915471 0.0158278072 -0.0015886103 -0.0425745131 -0.0051586523 -0.0334468217 -0.0157925120 -0.0154113189 -0.0478486330 0.0077727097 -0.0468199984 0.0160810381 -0.0034096639 0.0281305682 -0.0074380747 -0.0353435852 0.0210096311 0.0268559116 0.0464821826 0.0030186981 -0.0112726654 0.0108516561 -0.0115854212 -0.0295796103 0.0001263924 -0.0050947485 0.0061451582 0.0425725345 0.0148374825 -0.0189846474 -0.0478229454 0.0146826761 -0.0239136071 -0.0324701691 -0.0191374447 -0.0135665362 -0.0676698598 0.0520869150 0.0545721285 0.1312355860 -0.0528872016 0.0966559978 -0.0040089785 -0.0122628973 -0.0666456948 0.0747576489 0.0358931382 -0.0143289412 0.0165486939 -0.0334615394 0.0096209831 0.0080756104 -0.0603331046 -0.0610843844 0.0418076960 0.0049150400 0.0082959651 0.0378716404 -0.0174517742 0.0496259021 0.0748502481 -0.0065734186 0.0057471553 0.0435025927 0.0726422473 -0.0120795028 0.0097174417 -0.0063819605 -0.0078583651 0.0130541679 -0.0110022449 0.0002840087 0.0014100503 -0.0021888179 0.0108804730 -0.0042305772 0.0030898922 0.0013713028 0.0066247085 -0.0001107161 -0.0065655812 0.0174023997 -0.0074445601 -0.0086544916 0.0211942223 -0.0137271871 -0.0017888659 -0.0014711615 0.0032298123 0.0133844220 0.0037695351 -0.0019132396 -0.0021649153 0.0070865886 -0.0021398507 -0.0058051059 0.0233704271 -0.0143910150 -0.0132489524 -0.0062036084 0.0112315974 0.0010234302 0.0063522124 -0.0087820661 0.0140544533 0.0077026844 -0.0156135541 0.0099077583 -0.0035096011 -0.0076724024 -0.0021025367 -0.0141924523 0.0111130108 -0.0225154817 -0.0084872787 0.0160070897 -0.0037573218 0.0125958287 -0.0177374036 0.0099699773 0.0002276161 -0.0036104842 0.0161093660 -0.0058692065 -0.0109421956 0.0007374722 -0.0230012934 0.0212127565 0.0065914712 0.0104606969 -0.0039377320 0.0159592257 0.0145499570 -0.0073143097 -0.0067924602 0.0026559740 0.0031779983 0.0179262607 -0.0125045338 0.0090173773 -0.0160293037 -0.0113690689 0.0135840615 -0.0208581982 -0.0099899766 0.0168534616 -0.0131180334 0.0038344283 -0.0016138575 -0.0158425243 0.0224654291 0.0059475866 -0.0058589083 0.0018279330 -0.0207763743 -0.0128384015 0.0330964564 -0.0059402670 -0.0277159178 0.0088238182 0.0261531789 -0.0184014214 0.0229261511 0.0250967881 -0.0417805586 0.0112783847 0.0307514500 -0.0181901631 0.0327230846 0.0324684029 -0.0018969555 0.0005501062 -0.0227400582 -0.0022906477 0.0011207679 -0.0197374384 -0.0056284991 -0.0008079948 -0.0231288531 -0.0161466820 -0.0013360488 -0.0057111036 -0.0054243407 -0.0003792840 -0.0251013106 -0.0227445408 -0.0018036500 0.0036138341 -0.0073093404 -0.0002443666 -0.0128223234 -0.0181518659 -0.0015804908 0.0018884290 -0.0080636248 -0.0002533656 -0.0088268566 -0.0264975516 -0.0026853119 0.0184252963 0.0255875028 0.0821606140 -0.1054559864 -0.0466093767 0.1138247046 -0.2364756634 0.1560555028 0.1832184516 -0.0700126754 0.0278798650 0.0779956578 -0.0998406385 -0.1019997660 0.0970122785 -0.1065922336 -0.2292394933 -0.1187776005 -0.2871787233 -0.1953131825 0.3641579927 -0.2068089060 0.0285918919 0.1178875218 0.0786631876 0.0185494499 0.0188374154 0.0050732648 0.0353517308 0.0292768486 0.0030602120 0.0285830269 0.0314389546 -0.0101852694 0.0217247361 0.0011596189 -0.0153844736 0.0073007084 0.0241863725 -0.0080017907 -0.0089371928 -0.0242113032 0.0205279854 0.0105531966 -0.0087762871 0.0222863878 0.0106192216 -0.0305743287 -0.0133685679 0.0078145374 -0.0235793550 -0.0214415041 0.0245880093 -0.0293873438 -0.0466036204 -0.0212161390 -0.0238188038 0.0332726846 0.0051865583 0.0327462745 0.0098213371 -0.0521330432 0.0149892637 0.0263694255 -0.0791791186 0.0582323497 -0.0567369506 -0.0752635892 -0.0023915350 0.0663564037 0.0331615208 0.0001413680 0.0121308089 -0.0431667601 -0.0144142485 0.0007060420 -0.0181088842 -0.0126293621 -0.0005776066 0.0515085145 -0.0083048937 0.0014990043 0.0240024693 -0.0440155923 -0.0033693604 -0.0318620546 0.0282608598 -0.0022095061 0.0290513328 0.0108394379 0.0068458068 0.0249151907 -0.0099499101 -0.0257440060 0.0251661350 -0.0710940646 -0.0106969590 -0.0758715756 0.0631002475 -0.0011878339 0.0411065653 0.0199102651 0.0183246548 0.0395258517 -0.0230374959 0.0137928710 0.0284200192 -0.0410182624 0.0072192647 0.0334300379 -0.0476945656 0.0055817982 0.0115678189 -0.0092723068 0.0048113629 0.0031416280 0.0043491766 0.0167848411 0.0100004501 -0.0000247053 0.0108985456 0.0060479771 -0.0050107911 0.0140907384 0.0062977925 -0.0047322248 0.0159541393 0.0017383634 0.0104521665 0.0096217793 0.0087910854 -0.0011063026 0.0156006298 0.0075576936 -0.0055408226 0.0178041436 0.0111050540 -0.0104951368 0.0161943753 -0.0074491465 0.0185356524 0.0040322984 0.0006371077 0.0058660954 0.0164499817 -0.0166187627 0.0342071823 -0.0761766238 -0.0269106406 0.0392405431 -0.0797282244 0.0125267001 -0.0099461433 -0.0350068768 -0.0315507877 -0.0248568990 -0.0291398147 -0.0513449199 0.0189561954 -0.0518124417 -0.1244834910 0.1112594015 -0.1245174441 0.0668825237 0.0566117840 0.0940386850 -0.0405997699 -0.1229452540 0.0371077283 0.1187445010 0.0177560619 0.0053163622 -0.0767603928 -0.0027593357 -0.0165237003 -0.0171382180 -0.0411839013 0.0265412553 0.0194002089 0.0252396135 0.0308018224 -0.1346213892 -0.2880388882 0.0082129152 -0.0421009390 -0.1105747505 -0.2288315093 -0.0980582999 -0.2430468479 0.2283963939 0.0729298010 0.0572732236 -0.1106250344 0.2492327616 -0.0291627644 -0.0079000061 0.0934192947 0.0261126301 0.0117839837 -0.2484407852 0.0371005845 -0.0116411417 0.0019674041 -0.1394602308 -0.1999261040 -0.1863413110 0.0227179564 -0.0049670711 0.1002026182 0.0480706177 0.0363772683 0.0211583810 -0.0148140250 0.0260487015 -0.0300618691 0.0924805874 0.0400710967 0.0204822503 -0.0046528907 0.0215558566 0.0167812427 -0.0003610680 0.0180806139 0.0012901210 0.0113787937 -0.0089815691 -0.0247410450 0.0102933879 -0.0191618073 -0.0166123653 -0.0064622104 -0.0081215707 -0.0016727763 -0.0184488301 0.0188860278 0.0240837098 -0.0045002294 0.0222667042 0.0151462551 0.0140251964 -0.0247708571 -0.0275510645 -0.0010105816 -0.0027708646 -0.0209276788 -0.0089917908 -0.0092239082 -0.0117590413 -0.0289475984 0.0387984087 0.0222533413 -0.0178830512 -0.0198133051 0.0137582474 -0.0091852188 0.0214965398 -0.0118397156 0.0117555058 0.0308962214 -0.0199873629 0.0232163580 0.0160274765 -0.0143751375 0.0140131585 -0.0246529559 0.0399571292 -0.0322481357 -0.0272187078 0.0381866890 -0.0193135177 0.0459787844 -0.0149420546 0.0112864734 0.0042927302 -0.0374642427 0.0395203382 0.0242447988 -0.0376758605 0.0260769096 -0.0486088600 -0.0025305257 -0.0034390107 0.0044132231 -0.0485645475 -0.0130201992 0.0184279272 0.0197197419 -0.0111955137 -0.0089161082 -0.0467077121 0.0282276577 -0.0241845243 0.0274747622 0.0170398767 -0.0335730771 0.0345330484 0.0141601693 -0.0420243784 0.0267135766 -0.0053961763 -0.0104414906 0.0383668140 -0.0351799562 -0.0107680074 0.0170641279 -0.0027529550 0.0176914727 0.0383705422 -0.0532075616 0.0167126760 0.0480720366 -0.0136364051 -0.0546211964 0.0429482143 -0.0355569176 -0.0409980900 0.0679763200 -0.0167434146 -0.0615525368 0.0480430982 -0.0511264190 -0.0432346981 0.0051771685 -0.0188113069 0.0497051318 -0.0026232482 -0.0191883776 0.0372499762 0.0204005551 -0.0066085363 0.0536536493 0.0383557600 0.0077339188 0.0135307323 0.0299819571 -0.0087400933 0.0603531636 0.0590356172 0.0177189786 -0.0048311406 0.0013851373 -0.0045764271 0.0204984968 0.0307441386 0.0097888426 -0.0074443001 -0.0071339774 -0.0036325118 0.0065498246 0.0445250524 0.0217738741 -0.0445422472 0.0040309717 0.0309544680 -0.0935014933 0.0138738868 -0.0237040471 -0.1680754957 0.0039893990 0.0775705147 -0.0473713390 0.0381865261 0.0928963231 -0.1250384785 0.0052443366 -0.0786575522 0.0128568304 0.0782690116 -0.0561002059 0.0189857568 0.0119801814 -0.1208254209 0.0333305898 -0.0250459991 -0.1052487443 0.0126613728 -0.0195271470 -0.0630239043 -0.0407161759 -0.0140328889 -0.0675343648 -0.0286787656 -0.0138104809 -0.0682274384 -0.0090843274 -0.0435112123 -0.0056867010 0.0160785779 -0.0320229522 -0.0501152068 -0.0063751143 -0.0194074515 0.0591791965 0.0117260265 -0.0425982547 0.0245870522 -0.0104524242 0.0101662682 0.0723996051 0.0066404568 -0.0012931785 0.0672191322 0.0468240355 0.0096388930 0.0712136077 0.0226242051 -0.0036823154 0.0559511595 -0.0109063513 -0.0247927593 -0.0569716956 0.0073481840 0.0422451933 -0.0074263648 -0.0025009700 0.1052886654 0.0514543069 -0.0348038619 0.0630817523 -0.0664722468 0.0450080419 -0.0119309353 0.0019158047 -0.0162517976 0.0660121518 -0.0597298976 0.0581550367 0.0202248112 -0.0174132765 0.0291548272 -0.0540423668 0.0465990871 -0.0339934580 -0.0447761422 0.0408717661 -0.0184102852 0.0278430375 -0.0250978617 0.0337586668 -0.0447902204 0.0394488323 -0.0133292112 -0.0349154670 0.0358935250 -0.0160407752 -0.0498380121 0.0375886704 -0.0235970102 0.0832347588 -0.0707206801 0.0669767864 -0.0514756223 0.0519909083 -0.0156404885 -0.0225412573 0.0282298289 -0.0240233425 -0.0024857000 -0.0231129198 0.0144919728 -0.0115508675 -0.0059146900 0.0154997923 0.0131975857 0.0061897408 -0.0106225498 -0.0073572844 -0.0066967513 -0.0214701635 0.0097560711 -0.0036995799 -0.0231418726 0.0180313154 0.0018772331 -0.0099867156 -0.0022850144 0.0033631997 -0.0108322135 0.0028389292 -0.0174607530 -0.0234803275 0.0159555971 -0.0021457798 -0.0373246054 0.0356002436 -0.0139427078 0.0014904009 -0.0088062319 0.0035774738 0.0030982501 0.0053290802 -0.0273632039 -0.0268857657 -0.0153034350 -0.0080899703 -0.0210907277 0.0280157183 -0.0167575433 0.0350367770 0.0222426848 -0.0415087488 0.0477512843 0.0152979973 0.0709580937 0.0549903033 -0.0317675014 0.0159059479 -0.0346563042 -0.0252033344 0.0217158439 -0.0392964852 -0.0607855702 0.0706597216 -0.0711424399 0.0350084051 0.0382943553 0.0526848019 -0.0253077203 -0.0782187910 0.0131072097 0.0656886191 0.0115315905 0.0080399331 -0.0463127629 -0.0022470876 -0.0032123078 0.0026617720 -0.0377937195 0.0224358867 0.0119474147 0.0047121972 0.0093606478 -0.0880251932 -0.1961299361 -0.0025941398 -0.0115167451 -0.0708176358 -0.1610105395 -0.0643029023 -0.1428888686 0.1335750156 0.0358036855 0.0216848428 -0.0501084172 0.1297671782 -0.0032517316 0.0042288884 0.0685986491 0.0108372749 0.0027300185 -0.1523206067 0.0203309368 0.0087702493 -0.0035398145 -0.0860496017 -0.1027650344 -0.1000970664 0.0026314249 -0.0019065033 0.0672459483 0.0206798597 0.0118549720 -0.0072409569 -0.0235395175 0.0179275750 -0.0227601889 0.0515946523 -0.0006024079 -0.0061583609 -0.0668043208 -0.0463613240 -0.0405602392 -0.0610510724 -0.0165166126 -0.0443040021 0.0224824044 0.0353720751 0.0050804999 0.0836971853 0.0323260138 0.0443171010 0.0699535464 0.0111593160 0.0557910911 -0.0199033678 -0.0376096075 -0.0743629213 -0.1104005445 -0.0150968217 -0.0947987489 0.0230260820 0.0828606333 0.0246117207 0.0229905358 0.0018308748 0.0863631790 0.1078588416 0.0185587731 0.1204445528 -0.0415913779 -0.0732171835 -0.0274675855 0.0676753549 0.0308241737 -0.0540553229 -0.0114393369 -0.0320081571 -0.0199223528 -0.0853672189 -0.0371728578 0.0272882790 -0.0770641422 -0.0190308700 0.0709856423 0.0151720381 0.0356523083 -0.0525037424 0.1203344201 0.0384323808 -0.1107437125 0.0062713392 -0.0830014927 0.0180717147 -0.0288051466 -0.0032857375 0.0583092795 -0.1263946126 -0.0316642847 0.1487789765 0.0209025113 0.0710612206 -0.0236145086 -0.0433193920 -0.0097676207 0.0919403653 -0.0156745062 -0.0421337115 -0.0205281072 0.0527987250 0.0121326802 0.1059452132 -0.0152057821 0.0401457159 -0.0056201729 -0.0412049242 0.0452382264 -0.0340212926 -0.0296565041 0.0632399106 -0.0053350329 -0.0186836513 0.0169680707 -0.0361676921 0.0150760687 -0.0146515570 0.0037779857 -0.0211784876 -0.0069951956 -0.0458214455 0.0415362770 -0.0692791725 -0.0430326896 -0.0107422932 0.0790108511 -0.0510659382 0.0170818105 0.0321598052 -0.0538913318 -0.0093752595 0.0918082766 -0.0686810397 0.0456522020 0.0210514073 -0.0237738568 0.0467653729 -0.0653597903 0.0109214293 0.0475831073 -0.0498077430 -0.0400585248 0.0269815451 -0.0870659064 -0.0579577626 -0.0031039453 -0.0338683007 -0.0550693210 0.0301771969 -0.1011783755 -0.0867161916 -0.0280602962 -0.0225950483 0.0041445120 0.0205914398 -0.0166030942 -0.0425584885 -0.0071638544 0.0207244266 0.0174478817 0.0191195286 0.0113565828 -0.0628479118 -0.0337223835 0.0838851879 0.0026105011 -0.0504095762 -0.0173363634 0.0439743444 -0.0978084587 0.0045686910 -0.0550823501 -0.0982125289 -0.0363747456 0.0368663178 -0.0192469667 -0.0068335101 0.0489640775 -0.0925081537 0.0610456230 0.1767436398 0.0323912227 0.1545857866 0.0841869830 -0.2563685788 0.1354429022 -0.0269812760 -0.1181416952 -0.0210108704 0.0038687690 -0.0250748162 -0.0267012690 0.0028432279 -0.0057378985 -0.0811717208 0.0079098972 -0.0078411050 -0.0442485313 -0.0027928608 0.0029379250 0.0222783364 -0.0044511310 -0.0131345142 0.0207737498 -0.0311407833 0.0226706278 0.0311644543 -0.0283164428 0.0196549105 0.0174925572 0.0079320646 0.0382726582 -0.0170997834 -0.0056168005 0.0302734304 0.0198640568 0.0144685271 0.0393968163 -0.0405136968 -0.0135032476 -0.0023391893 0.0283757600 -0.0051807309 -0.0129563039 0.0476291791 -0.0093693557 -0.0020936097 0.0367321779 0.0491314851 0.1173339129 -0.0825743584 0.0003400335 -0.0537186828 0.0822588882 0.0469802624 -0.0214369108 0.0431995539 -0.1195499239 0.0091126106 -0.0691323761 -0.0449381298 -0.0215612946 -0.0481213558 0.1107545330 -0.0463489158 0.0159173284 0.0618214330 -0.1084110287 -0.0130675870 -0.0576350797 0.0418143201 -0.0439205844 0.0869170772 -0.0278914100 0.0044924354 0.0582654220 -0.0529110022 -0.0444032361 0.0680181535 -0.1423443500 -0.0185006692 -0.1586535763 0.1223449875 -0.0569294762 0.1092590189 -0.0289374003 0.0213573287 0.0572750753 -0.0427083806 0.0324739404 0.0128877789 -0.0213502741 -0.0077500276 0.0381807955 -0.0534306727 -0.0314654757 -0.0642894107 -0.0199728669 0.0269687577 0.0353195868 -0.0135467092 0.0669367328 -0.0650189662 0.0325613996 0.0704215822 -0.0820404514 0.0122809583 0.0128377609 -0.0123804689 -0.0044888926 0.0182076856 -0.0176183935 0.0434640570 0.0775572874 -0.0978478968 0.0463462702 0.1103367106 -0.1160063639 0.0282364474 -0.0217297542 0.0118753781 -0.0131109121 -0.0201135689 -0.0158442973 0.0676580733 0.0947440945 0.0984919504 -0.0478153950 0.0744478190 -0.0371579822 0.0427494306 -0.1574461062 -0.0168409881 0.0392456620 -0.1700865537 0.0151506435 0.0460169049 0.0174712571 0.0262378182 -0.0464909004 0.0342506072 0.0130520305 -0.0239643349 0.0273110412 0.0332987796 -0.0407396619 0.0281221241 -0.0130962664 -0.0166185818 -0.0229117036 -0.0031327570 0.0516295093 0.0019283592 -0.0277190129 -0.0005810869 -0.0043024458 0.0223184924 0.0052674732 -0.0035462751 -0.0095004843 0.0291166244 -0.0175672313 -0.0099500331 -0.0072466813 0.0012225704 0.0683558139 0.1842687428 0.0193716497 -0.1022536273 0.0526966032 0.1055104424 0.0471924367 0.0080719573 -0.0820792549 -0.0057075558 -0.0004711759 0.0278479557 -0.0577461523 0.0157429303 0.0006208091 -0.0364423768 0.0018638868 -0.0098579306 0.0797819851 -0.0047305265 -0.0194304918 0.0050737554 0.0501992426 0.0364383401 0.0374351337 0.0143694737 0.0020191857 -0.0413448361 -0.0147463169 0.0135444008 0.0087854478 -0.0031036366 -0.0096664570 0.0106015271 -0.0347092354 0.0040293813 0.0174233822 -0.0593481127 -0.0208306433 -0.0180337701 -0.0454302608 -0.0013396280 -0.0352499812 0.0327702190 0.0181283951 -0.0259813951 0.0883571429 0.0001900878 0.0205918395 0.0510241349 -0.0023980642 0.0512767431 -0.0493143644 -0.0089964358 -0.0439810721 -0.0870766722 0.0007485285 -0.0579997106 0.0266682766 0.0463157890 -0.0110076066 0.0201193870 -0.0043794079 0.0540539944 0.0785231232 0.0044356628 0.1012704404 -0.0921091513 -0.0100089750 -0.0007059521 0.0461819574 0.0076622366 -0.0279185077 -0.0095248712 -0.0074416447 -0.0187631118 -0.0527447829 -0.0052807252 0.0115280705 -0.0344328301 -0.0056771585 0.0416022674 0.0210128470 0.0094816421 -0.0029834212 0.0764200182 0.0059662172 -0.0563571989 -0.0060301577 -0.0278371415 0.0071680998 -0.0184054722 0.0020726061 0.0258985008 -0.0535468175 -0.0117602658 0.0826552016 0.0298602884 0.0223775035 -0.0178940638 -0.0430900659 -0.0040148944 0.0184630420 -0.0314140008 -0.0128493459 0.0017340631 0.0232700889 0.0037147836 0.0440649965 -0.0012140474 0.0136179297 0.0248051907 -0.0022462574 0.0042819633 0.0181645240 0.0012999166 0.0229531822 0.0210554197 -0.0166085743 0.0172594844 0.0072045176 -0.0307229570 -0.0156651617 0.0120110303 -0.0141473557 0.0377910034 -0.0028956936 -0.0333102252 -0.0265128388 0.0217901281 -0.0218323755 0.0079895539 -0.0035282442 -0.0292188300 -0.0265047324 0.0411779130 -0.0258527997 0.0042357193 -0.0201018207 -0.0266550962 -0.0544317763 -0.0227529725 0.0347928180 -0.0173697621 0.0006520972 0.0337041285 -0.0180223952 -0.0341897962 0.0138920324 -0.0402008828 -0.0309525147 -0.0122541183 -0.0290872099 -0.0517649809 0.0166132986 -0.0515845829 -0.0397916216 -0.0303529963 -0.0391966015 -0.0000190162 0.0108584131 0.0033900345 -0.0227171056 -0.0140135740 0.0081127926 0.0141955147 0.0094515000 0.0260969797 -0.0277195112 -0.0340617054 0.0367506320 -0.0087419005 0.0738163594 -0.0194145311 -0.0618710027 0.1157493604 -0.0822246226 0.0694237510 0.1643751909 0.0319422100 -0.0445502995 0.0594283762 -0.0538849642 -0.0535044003 0.0588292063 -0.0571039102 -0.1614796590 -0.1373790176 -0.2241647190 -0.1386418935 0.3103116955 -0.1539570712 0.0600050320 0.0719392218 0.1154560945 -0.0121045720 -0.0138533064 0.0166927659 0.0109147898 -0.0838756348 0.2467680782 0.0124643705 -0.0801186274 0.1322492641 -0.0502629392 -0.0496826034 -0.0996997531 -0.0332304991 -0.0085543174 -0.0614254912 0.0176838793 -0.0182883402 -0.0672322204 0.0259338753 -0.0609605952 -0.1017158821 -0.0286961401 -0.0855382630 0.1352150369 0.0091557558 -0.0141041825 0.0204503203 -0.0245738707 -0.0946988343 0.2507383143 -0.0367344756 0.0388718454 -0.0307184015 0.0442238180 0.0416461251 -0.0188853078 -0.0075408751 0.0169051721 0.0194563498 -0.0208912317 0.0059699578 0.0262686268 0.0126192176 -0.0548519115 0.0805257172 0.0228664663 -0.0128551249 0.0130627917 -0.0196655826 -0.0286035900 -0.0014843836 -0.0100167410 -0.0200816182 -0.0072978742 0.0237832008 -0.0001663481 -0.0094969584 0.0056979556 -0.0292883754 -0.0158759622 -0.0140574743 0.0063755011 -0.0043552297 0.0158563272 0.0062886119 -0.0050101299 0.0071934277 -0.0065658482 -0.0286833904 0.0063265075 -0.0474351960 -0.0210090372 -0.0334088340 0.0210701314 0.0052231711 0.0230219531 0.0127911060 0.0019833767 0.0219102691 -0.0097030017 0.0040845418 0.0119833710 -0.0119037752 -0.0006108258 0.0186154199 -0.0190738543 -0.0082282949 -0.0162020411 -0.0005285875 0.0042675928 0.0161548553 -0.0127999876 0.0182039157 -0.0219726419 0.0191800310 0.0124341161 -0.0280945669 0.0165438619 -0.0001523796 -0.0047774237 0.0032030931 0.0036349941 -0.0059679865 0.0151079929 0.0158523245 -0.0318572239 0.0252939847 0.0215118369 -0.0382096348 0.0239163268 -0.0077620644 0.0022946432 -0.0001800137 -0.0059115951 -0.0056173273 0.0199081455 0.0192709087 0.0416875344 -0.0378486911 0.0240667534 -0.0066594634 0.0131475254 -0.0472832328 -0.0034030901 -0.0053449410 -0.0441049190 0.0778673761 0.0770382092 -0.0157647224 0.0081007197 -0.0160233497 0.0093490528 0.0022576665 -0.0060704083 0.0024285662 -0.0034475076 -0.0010165475 -0.0031199962 0.0007138122 -0.0033478000 0.0007327917 -0.0019020350 0.0068283165 0.0040731829 0.0020013353 -0.0017498045 -0.0054608127 0.0010116633 -0.0003126558 -0.0025556355 -0.0015287928 0.0033774962 -0.0050355743 0.0040046939 0.0003705969 0.0012921055 0.0054868686 0.0242422297 0.0034691701 -0.0249357016 0.0079413267 0.0141070772 0.0046080276 -0.0062704690 -0.0025643872 0.0026703878 -0.0056772071 0.0002697558 0.0048347614 0.0099691941 -0.0015830645 -0.0001258141 -0.0012149450 -0.0163502145 0.0027886411 0.0002623181 -0.0069918732 0.0021761470 0.0003542968 -0.0052966295 -0.0025730374 0.0042651653 -0.0000529869 0.0034793447 0.0006693962 0.0055197260 0.0104926735 -0.0024144688 -0.0029044614 0.0043909864 -0.0000451878 0.0045898343 -0.0416039692 0.0532946924 -0.0228736803 -0.0294341056 0.0656915767 -0.0452194048 0.0099043090 -0.0230091832 -0.0106846898 0.0436902474 -0.0911954182 0.0301643921 0.0011551470 -0.0338810952 0.0082493109 -0.0447242239 0.0656750571 -0.0317379265 -0.0301177634 0.1179655519 -0.0619360673 0.0099211334 -0.0216129857 -0.0115995359 0.0313598584 -0.0226054006 0.0147705759 -0.0110806795 -0.0535176666 0.0091016603 -0.0673396111 0.1089055036 -0.0554998267 0.0568623575 0.0949930705 -0.0406484077 -0.0339967620 -0.0307357549 -0.0067118906 -0.0928514743 -0.1183761781 0.0361227634 -0.0106037246 -0.0496878939 0.0138412451 0.0923093187 0.0879981757 -0.0263030672 0.0752916828 0.1706276103 -0.0563610698 -0.0440574583 -0.0314750706 -0.0114694065 -0.0437981607 -0.0213711076 0.0127376761 0.0027343365 -0.0826658312 0.0094469451 0.1490412452 0.1459040602 -0.0521835626 -0.0043232537 0.0309955768 0.0030866424 0.0364272991 0.0389961069 -0.0092290565 0.0016675703 0.0546341422 -0.0057306553 -0.0041281720 0.0555787296 -0.0092132782 -0.0142135962 -0.1008069791 0.0285451632 -0.0694586846 -0.0864335797 -0.0274406106 0.0181031292 -0.0181461801 -0.0686218894 0.0059666746 0.0816585095 -0.0397757010 0.0754083390 -0.0337757934 -0.1636131367 0.0187207012 0.1339519807 -0.1025930210 -0.0740718293 0.0063742173 0.0520979699 0.0108180348 0.0834236563 0.0834838230 -0.1479315587 0.0221203868 0.0961038932 0.0374693700 0.1358865359 0.1674880322 0.0413958949 -0.1093146393 -0.0304752624 -0.0103469598 -0.1082761869 0.0262985384 0.0843624636 -0.0164160311 0.0523458806 0.0244118702 0.0906698096 0.0904388626 0.1682619630 -0.0271214290 0.0984620355 0.0170421596 0.1491396782 0.1780688060 -0.0190273893 -0.0074599696 -0.0699645491 0.0251218156 0.0911643797 -0.0308452060 -0.0871933396 -0.0009942903 -0.1700861747 0.0249986456 0.1501956567 -0.0882519927 -0.0095781413 0.0172273449 -0.0011829258 -0.0263727986 0.0361100358 -0.0102256581 0.0114326097 0.0421302541 0.0130950990 -0.0279369620 0.0065155864 -0.0134821096 -0.0035237184 -0.0008151287 -0.0029820727 -0.0101332104 -0.0653380774 -0.0640818002 -0.0438617234 0.0792870802 -0.0265182495 0.0336201976 -0.0037600859 0.0685306438 0.0226723805 0.0252074841 0.0268622204 0.0402490706 0.0451718894 -0.0417606871 0.0084553224 0.0506268384 -0.0085995919 0.0395032787 0.0616578196 0.0293530573 0.0515021842 -0.0091048962 0.0076448037 -0.0781953760 -0.0068815088 0.0376546162 -0.0251137209 0.0647167021 0.0500374374 0.0145459015 0.0155400435 -0.0168511179 -0.0257921087 0.0151931491 0.0373616384 0.0034424295 0.0211220232 -0.0725032069 0.0148922817 -0.1919636977 -0.0409712024 -0.0836520776 -0.1450129790 -0.0523506670 -0.0427764722 -0.1541213379 -0.0581892401 0.1538864483 -0.0767571603 -0.0089518454 -0.2601948511 -0.0509931864 0.0232659052 -0.0380206035 -0.0047069847 0.0348821945 -0.0384775707 0.0567088185 -0.0074750070 -0.0107994248 0.0331166076 0.0085518570 0.0223048903 0.0005101809 0.0203500177 0.0257793358 -0.0002533522 0.0266196548 -0.0053680630 0.0262527561 0.0102212583 0.0310680951 -0.0034049255 0.0270643048 0.0265551130 0.0037441255 0.0199516905 0.0278328700 -0.0047403792 0.0270492171 -0.0245746925 0.0423807332 -0.0032088264 0.0454977786 -0.0045968455 0.0375391737 -0.0267932021 -0.0075867029 0.0128625479 -0.0225918005 0.0223036679 -0.0106733815 -0.0389180141 0.0373954512 0.0083253967 0.0260580401 0.0087187681 -0.0083112028 -0.0200024931 0.0158250418 -0.0155594827 0.0355421036 -0.0175448386 -0.0186398243 0.0377752684 -0.0105745361 0.0065909261 0.0114463082 -0.0076447979 0.0068175846 0.0060520390 -0.0097267377 -0.0229461290 0.0525764578 -0.0305467024 -0.0294918262 0.0490246593 -0.0123629112 0.0205530515 0.0068223112 -0.0112107910 0.0239160155 -0.0005912484 -0.0153974896 -0.0340844583 -0.0545451652 0.0414713437 -0.0213627427 0.0169843579 0.0122983609 -0.0139681292 -0.0417922643 0.0351851651 -0.0079551407 0.0643242463 0.1237247097 0.0246959869 0.0018493425 0.0045440654 0.0042352910 -0.0007913413 0.0036086655 0.0035847194 -0.0046155768 0.0025107327 0.0075818873 -0.0051387717 -0.0015245567 -0.0013085232 0.0038280695 -0.0103409055 -0.0073590554 -0.0041762133 0.0092514470 0.0006021758 -0.0016372417 -0.0018036581 0.0030559704 0.0012758177 0.0007457530 0.0042094410 -0.0024881005 0.0049604173 0.0004285841 -0.0180282644 -0.0491413457 -0.0133308403 0.0465866861 -0.0118500344 -0.0179905293 -0.0124596081 0.0278373718 0.0063215785 -0.0000585456 0.0054544484 0.0097955695 -0.0076210237 0.0249557140 0.0056694331 -0.0073893615 0.0099242538 -0.0119730972 -0.0037827543 -0.0027249065 0.0090386697 -0.0045328752 -0.0033465704 0.0100066593 0.0063653600 -0.0085944987 -0.0005821068 -0.0044370567 0.0033903006 -0.0069100268 -0.0042302844 0.0110340751 0.0021652144 -0.0008942632 0.0028796235 0.0016928316 -0.0181370261 0.1152171139 0.0229487492 0.0144242387 0.1215870009 -0.0086803717 0.0547907416 -0.0312615431 -0.0159581242 0.0332400628 -0.1368286674 0.0149052914 -0.0391898285 -0.0546204344 -0.0006912851 -0.0842551491 0.0986371159 0.0052984732 0.0328640985 0.2033993092 -0.0266864846 0.1033989170 -0.0373143313 -0.0559975566 0.0024291485 -0.0413997368 0.0143625830 -0.0856445628 -0.0837312872 -0.0128906912 -0.1684805965 0.1605106169 0.0156318791 0.0359548107 0.1452594177 -0.0053910955 -0.0660082650 -0.0233453587 -0.0076699513 -0.0888718209 -0.1523599124 0.0224619940 0.0159056777 -0.0680454263 0.0025426419 0.1258771547 0.1025053432 0.0018803474 0.0512882218 0.2453566454 -0.0219876087 -0.1176998577 -0.0151846609 -0.0457674441 -0.0199001556 -0.0450457915 0.0121185123 0.0501600482 -0.1101454084 -0.0122998651 0.2334360611 0.1595860223 0.0023975638 -0.0060776708 0.0492594159 0.0094019734 -0.0357692455 0.0437818136 0.0187693807 0.0077151885 0.0600329088 0.0011174880 0.0588718544 0.0324735497 0.0122694494 -0.0132629850 0.0970680607 -0.0179162183 0.0349000872 0.0887184984 -0.0256978183 -0.0567356364 0.0466237641 0.0170265102 -0.0202806456 -0.0357763664 0.0406926873 -0.1133854021 0.0609846431 0.0545562139 -0.0341767144 -0.0843644659 0.0960237842 0.0487683438 0.0212270184 -0.0657726951 0.0205975018 -0.0457793705 -0.0179400654 0.0984736531 0.0103119274 -0.1025217106 0.0405450884 -0.1038757425 -0.0229766218 0.0027711859 0.0665753589 -0.0050532161 0.0446906146 0.0568706879 -0.0124905280 -0.0095807213 0.0242934893 -0.0473462259 -0.0108453914 -0.0245947962 -0.0055121099 -0.0361958012 0.0275395674 -0.0804888979 -0.0360062949 -0.0582570456 -0.0106587847 0.0625955784 0.0177112188 0.0115484945 0.0115949567 -0.0261767470 0.0465325554 0.1038003286 0.0140784909 0.0321544690 0.0018110373 -0.0602091711 0.0983012577 0.0143566092 -0.0009638866 0.0005051155 0.0279008997 -0.0238504981 -0.0070123156 -0.0006921483 -0.0056607946 0.0036997574 0.0313061082 0.0181606907 -0.0005524688 -0.0016600906 0.0038236555 -0.0136478947 -0.0245126770 0.0515185969 0.0374272528 0.0525444026 -0.0575283678 -0.0084046088 -0.0424852895 0.0056046500 -0.0884833686 -0.0094949558 0.0077857707 -0.0092529755 -0.0486510603 0.0196044837 -0.0864508593 -0.0276412014 0.0135240699 -0.0459199572 0.0056660261 -0.0020306024 0.0157070875 0.0032368096 0.0071999407 0.0193338777 0.0115018772 -0.0055702185 -0.0376441150 0.0142013075 -0.0036718303 -0.0321533295 -0.0286646147 -0.0128844370 0.0594375019 -0.0024576573 -0.0052633436 -0.0000908599 -0.0536984218 -0.0148077682 0.1182866374 -0.0015340501 -0.0046126372 -0.0168393465 0.0128861433 0.0229855972 0.0101780778 0.0020949811 0.0031307582 0.0011384023 -0.0175656412 -0.0172257758 0.0141424557 -0.0032234352 0.0097463045 -0.0016359338 -0.0506364655 0.1143357204 -0.0784031400 -0.1256453181 0.1090337297 -0.0970487523 -0.0436369683 0.0372230767 -0.0479233115 0.0248899585 -0.0367416728 0.0164525758 0.0507818062 -0.0444325969 0.0159847366 -0.0114582696 0.0097419324 -0.0291868067 0.0604934680 -0.0663520821 0.0295935559 0.0366728337 -0.0546000397 0.0219538293 0.0538688825 -0.0345899831 0.0215421963 -0.0539100322 0.0449699703 -0.0618957717 0.0754441302 -0.0891278239 0.0349357902 -0.0389428264 0.0795987736 -0.0674577544 -0.0353234634 0.0389202572 -0.0235765339 -0.0293792835 0.0217849547 -0.0123011748 -0.0161351655 0.0002943764 0.0006787707 -0.0086276273 0.0290542733 0.0176101808 0.0043352439 -0.0109985668 0.0257543840 -0.0002666396 -0.0257985575 0.0156452631 -0.0050374939 0.0033049860 0.0095183938 0.0159657089 -0.0082525205 0.0284416335 0.0019939315 -0.0183016969 0.0427904994 0.0210229690 -0.0479231761 0.0287235628 -0.0014324148 0.0075080207 -0.0060116557 0.0291571480 -0.0230709181 0.0350300639 -0.0199386395 0.0587996765 0.0104545854 -0.0410958238 0.0098454272 0.0080855291 -0.0063590494 -0.0040766660 0.0024784688 0.0117228626 0.0102549675 -0.0115944650 -0.0326128944 0.0464085058 -0.0224406797 -0.0053821551 0.0274282984 0.0135392646 0.0529583588 -0.0018410390 0.0279433286 -0.0053872317 0.0262889078 0.0015810387 0.0201099073 -0.0349176195 -0.0273184570 -0.0026486402 -0.0111961997 -0.0050636027 -0.0098599959 0.0046776181 0.0171089660 0.0044307246 0.0108105130 0.0404228625 -0.0575702239 -0.0196256104 0.0062295699 -0.0486727502 -0.1832621996 -0.0319158653 0.1822695913 -0.0408149632 -0.0912488531 -0.0341091703 0.0870538476 0.0210567864 -0.0398447670 -0.0506695404 -0.0159708777 -0.0122115893 -0.0221853834 -0.0087636313 0.0582574279 -0.0299130771 0.0038902248 -0.0226824024 0.0003214115 0.0500955482 -0.0166077030 0.0002205480 0.0331435541 0.0141070269 -0.0287353642 -0.0014934487 -0.0752303737 -0.0240982760 0.0059059685 -0.1086599289 -0.0249325540 0.0356022160 -0.0437979634 -0.0382211230 -0.0525833117 0.0074149000 -0.0213331416 0.0059274455 0.0086629255 -0.0307056020 0.0147297483 -0.0033093157 0.0028616616 0.0040158158 -0.0142645099 0.0414299678 -0.0163387515 0.0035064660 0.0094100448 -0.0002830851 0.0219284631 -0.0348423733 0.0165944972 0.0112809504 -0.0531252169 0.0230915131 -0.0004703261 -0.0111064920 0.0152225321 -0.0047292112 0.0135221214 -0.0114219827 0.0083645619 0.0113083675 0.0012471889 0.0399492092 -0.0601650491 0.0266830577 0.0143374484 0.0142626579 -0.0137905393 -0.0011164701 -0.0052148018 0.0010507443 -0.0177439322 -0.0216285640 0.0124881017 -0.0067875191 -0.0053295259 0.0030640610 0.0135133082 0.0188891502 -0.0143742368 0.0213751746 0.0234889281 -0.0181956794 0.0029074547 -0.0050282036 0.0033109143 -0.0068961271 -0.0053009144 0.0059779501 -0.0099490752 -0.0065058835 0.0049599460 0.0209023276 0.0335517605 -0.0245955022 0.0135396202 -0.0091574245 -0.0059598623 -0.0076651724 -0.0135245407 -0.0005512302 0.0069658369 0.0030793435 0.0005657767 -0.0052585748 0.0117878119 -0.0026547736 -0.0029212253 0.0015388653 0.0078203726 0.0090652549 -0.0039584405 0.0326363775 0.0055323101 0.0003459714 0.0256991146 -0.0085500347 0.0072021633 0.0053938675 0.0139447150 -0.0013357269 0.0368467289 -0.0094381543 0.0103066758 -0.0005818254 0.0001388225 0.0029781754 0.0245839008 -0.0223880651 0.0094875822 -0.0138358645 -0.0016828641 0.0027160802 0.0242786253 -0.0431618698 0.0141250347 -0.0472220258 0.0182177276 -0.0091597578 -0.0317828773 -0.0004877932 -0.0102335704 0.0017806819 0.0116989730 -0.0029062951 -0.0101612845 -0.0121743718 0.0054421471 0.0266894267 0.0165108934 -0.0030297984 -0.0029288736 -0.0331590246 0.0109088894 0.0657989914 0.0091163963 -0.0037488967 -0.0231937791 0.0041670390 0.0035341434 -0.0072774984 0.0111627886 -0.0038806914 -0.0423063763 0.0059836298 0.0068119796 -0.0139189755 0.0666065449 -0.0373501144 -0.0273163204 0.1379885815 -0.1544569790 -0.0588247751 -0.0037475821 -0.1022864211 -0.0564170796 0.1764670332 0.0526363932 0.0100531162 -0.0165357887 0.0127104391 -0.0398815895 -0.0665420930 0.2903244926 0.2396122359 0.2169477843 -0.3308613361 0.0279442158 -0.2016091787 0.0319016009 -0.4097649856 0.0252413219 -0.0330164389 0.0264592585 0.1230935401 -0.0818260303 0.2790514183 0.0771787298 -0.0669639636 0.1500730663 -0.0249266262 -0.0108102480 -0.0542349843 -0.0105249993 -0.0246569712 -0.0450861951 -0.0159839544 0.0229375776 0.0865641077 -0.0321670033 0.0005403086 0.0656538474 0.0780917598 0.0404463199 -0.1499302779 0.0157035744 0.0239446800 -0.0048670979 0.1473046691 0.0442684433 -0.2920554571 0.0036467694 0.0407774719 0.0509606790 -0.0025484628 -0.0354980081 -0.0033746354 0.0108117287 0.0043192053 0.0157001117 0.0304047690 0.0661062374 -0.0568922196 0.0399399910 -0.0312539524 0.0298411002 -0.0230022636 0.0672158381 -0.0482170729 -0.0781236527 0.0526541105 -0.0558955179 -0.0284364542 0.0147082000 -0.0299442881 0.0178157439 -0.0196569758 0.0041992892 0.0288958947 -0.0329920471 0.0026386702 -0.0090511509 0.0053159075 -0.0169996617 0.0376627015 -0.0360714818 0.0152602113 0.0213203679 -0.0338972472 0.0035365901 0.0303325248 -0.0324864601 0.0039367542 -0.0365003708 0.0276967851 -0.0315423652 0.0471077099 -0.0467185892 0.0193914579 -0.0174686780 0.0505554533 -0.0441694558 -0.0180949012 0.0149560509 -0.0126224557 -0.0102412925 -0.0011852302 -0.0073602659 -0.0157762380 -0.0019552555 0.0015807725 0.0011113626 0.0089358935 0.0164061728 -0.0080289760 0.0016792957 0.0186407050 -0.0121574891 -0.0077033552 0.0076170640 -0.0062887602 0.0027984689 0.0057801153 0.0045652602 0.0013273110 0.0214302988 -0.0127323308 -0.0002973905 0.0316341793 -0.0072850255 -0.0147836248 0.0091856886 -0.0042353322 0.0064440837 -0.0051799975 0.0119979403 -0.0049205077 0.0263834757 0.0063847549 0.0145485505 0.0149399493 -0.0265196299 0.0083548797 -0.0018721059 -0.0020320256 -0.0119820536 -0.0028472573 -0.0292789706 -0.0216294060 0.0311455539 -0.0291583133 0.0189033178 -0.0149765994 -0.0035725446 0.0148744119 0.0134065283 0.0608864866 -0.0060086891 0.0149986348 -0.0029642445 0.0276990473 0.0012306342 0.0115786571 -0.0168437930 -0.0194030189 -0.0008651750 -0.0104623773 -0.0009363879 -0.0080119995 0.0077791276 0.0144316676 -0.0007949164 0.0125969159 0.0352444007 -0.0587126887 -0.0241478038 0.0068038491 -0.0214933912 -0.1040419520 -0.0137681563 0.1007938550 -0.0197120920 -0.0657918081 -0.0152556506 0.0433661529 0.0046226894 -0.0335800675 -0.0463111971 -0.0099602421 -0.0132394502 -0.0201628800 -0.0042712202 0.0579783056 -0.0284513482 0.0064931704 -0.0142133087 0.0040113509 0.0383750068 -0.0130933764 0.0078367389 0.0264108248 0.0089221670 -0.0164257021 0.0008565083 -0.0784947748 -0.0283173450 0.0133689027 -0.1045513031 -0.0335647381 0.0327090557 -0.0438507980 -0.0442635927 -0.0508069293 -0.0254112247 0.0465413411 -0.0366846213 -0.0374168655 0.0792732790 -0.0590545122 0.0045275646 -0.0171764348 -0.0034033279 0.0397204750 -0.1032048595 0.0471106063 0.0012048295 -0.0199350607 -0.0014363129 -0.0459812664 0.0767744054 -0.0571526464 -0.0546669424 0.1305045742 -0.0829604399 0.0057161463 -0.0188747072 -0.0023224366 0.0157311330 -0.0327875153 0.0304625934 -0.0007433421 -0.0174992330 -0.0028371824 -0.0740559041 0.1286128515 -0.0856640360 -0.0444378397 -0.0388750907 0.0393696460 -0.0027303813 0.0132342115 -0.0029639163 0.0433409725 0.0576738325 -0.0344553142 0.0119695297 0.0094335436 -0.0058586551 -0.0373389625 -0.0475686116 0.0401173158 -0.0675651353 -0.0645972350 0.0534155091 -0.0138845697 0.0137474929 -0.0101527339 0.0169037393 0.0150179759 -0.0163137910 0.0170043151 0.0045651247 -0.0082591324 -0.0561957066 -0.0863898865 0.0676685789 -0.0449859361 0.0213153749 0.0122932366 0.0309104434 0.0408416302 -0.0058317523 -0.0276760885 -0.0096707397 0.0011209954 0.0141405918 -0.0306116906 0.0091090852 0.0070870771 -0.0441055342 -0.0147436837 -0.0469035695 -0.0224472018 -0.0899911165 -0.0037291859 -0.0172803120 -0.0900266221 0.0308934492 -0.0042504939 -0.0252236022 -0.0085774297 -0.0175987842 -0.1469378649 0.0422518497 0.0058850481 -0.0248112659 -0.0300761253 -0.0150816952 -0.0533546614 0.0583774734 -0.0078858808 0.0587211484 -0.0496537864 -0.0090519530 -0.0419332359 0.1183608566 0.0005399755 0.1703387562 -0.0517457648 0.0180386740 0.0820574480 -0.0051544801 0.0229784733 0.0004416116 -0.0363016261 0.0091954651 0.0363141312 0.0297656834 -0.0067038584 -0.0705825513 -0.0470241910 0.0091360109 0.0238778367 0.0876796166 -0.0181371138 -0.1737752633 -0.0330813851 0.0114790468 0.0623487122 -0.0100711618 -0.0024357023 0.0088678931 -0.0452456745 0.0124369769 0.1100378415 -0.0093644193 -0.0088416550 0.0137901758 0.0504655137 -0.0237680372 -0.0352782283 0.0895743173 -0.1031569187 -0.0806660653 0.0221479987 -0.0558509240 -0.0529409515 0.1311922356 0.0404263982 -0.0054268584 -0.0207664527 0.0001381523 -0.0229307554 -0.0496104244 0.1540304339 0.1321788129 0.1088513897 -0.1888551677 0.0133814971 -0.1229544794 0.0118797951 -0.2296702588 -0.0050638778 0.0061917234 -0.0056278353 -0.0009962936 0.0114005656 -0.0140725003 -0.0048954511 0.0119454607 -0.0088661654 -0.0001284078 0.0061981787 -0.0009508408 -0.0030249446 0.0045315559 -0.0072025743 -0.0009419619 -0.0030132733 -0.0082945130 0.0026441363 0.0020567915 -0.0046252217 -0.0050575776 -0.0072799066 0.0134117472 -0.0009315911 -0.0038448573 -0.0007129548 -0.0111661320 -0.0075197310 0.0253122952 -0.0025308074 -0.0057701574 -0.0081873093 -0.0048453266 -0.0004151366 -0.0091646175 -0.0058943192 -0.0040074222 -0.0058590020 0.0018503023 -0.0127161560 0.0123095566 -0.0090302128 -0.0048262381 -0.0014424057 0.0180636264 -0.0326615315 0.0198878451 0.0710810140 -0.0564626823 0.0590461333 0.0245440119 -0.0165382262 0.0317142622 -0.0160849561 0.0208590191 -0.0083370812 -0.0305310965 0.0317831257 -0.0064232810 0.0074136141 -0.0042823162 0.0206034743 -0.0384676495 0.0404561117 -0.0140444406 -0.0191385936 0.0317795583 -0.0075961540 -0.0354769193 0.0285877362 -0.0115808892 0.0339569706 -0.0261626204 0.0380548081 -0.0495798723 0.0545670986 -0.0189912382 0.0166946410 -0.0339776382 0.0261157529 0.0177882914 -0.0410691633 0.0225272754 0.0212374310 -0.0596216261 0.0494295430 0.0317599472 0.0101754132 -0.0048043867 0.0027000288 -0.0241539681 -0.0111134804 0.0130046436 0.0174953501 -0.0308125010 0.0134834180 0.0340879935 -0.0050179735 0.0003149192 0.0081943499 0.0025696203 -0.0067467934 0.0004598360 -0.0310265638 0.0203472433 0.0217136524 -0.0529037518 0.0036419581 0.0567367658 -0.0023746397 -0.0108423472 0.0104282167 0.0237761887 -0.0164402960 -0.0032801376 -0.0444171700 0.0039619221 -0.0548525562 -0.0034190005 0.0220117536 -0.0030967352 0.0054552900 0.0021227813 0.0045334587 0.0089088176 0.0022510793 -0.0003371222 -0.0043036444 -0.0623011800 -0.0795618101 -0.0000777414 -0.0011141323 -0.0132045270 0.0367457030 0.1999584054 -0.0227667772 -0.0225069101 0.0027462259 0.0825858048 0.0097451781 -0.0004097271 0.0272747519 -0.0199775102 0.0176331693 -0.0252369998 -0.0013106013 -0.0200369441 0.0330441896 0.0302179791 -0.0244030971 0.0446363927 0.0805449000 -0.1733119089 -0.0823927518 0.0207609463 0.0319168869 -0.0067414153 0.0305494625 -0.0427022844 0.0334637238 -0.1002326555 0.0256219946 -0.0480911017 -0.0336825707 -0.0680878894 -0.1254515057 -0.0200717047 -0.0099643828 -0.0469886989 -0.0088450765 0.1710111727 -0.0722321096 0.0125044325 -0.0238412042 0.0273529723 0.0634335850 -0.0216945694 0.0413023807 0.0337378946 -0.0093720892 0.0016797824 0.0117539304 -0.2434088991 -0.0952276073 0.0619658425 -0.2806627652 -0.1194646752 0.0805273872 -0.1239447341 -0.1495125938 -0.1337199754 0.0021440768 -0.0044382356 0.0045210012 0.0049696574 -0.0106184281 0.0079949476 -0.0010773034 0.0027370766 -0.0003875666 -0.0035799843 0.0102182598 -0.0045096621 0.0003664454 0.0006141091 0.0013683006 0.0041092548 -0.0065032014 0.0060992772 0.0079231926 -0.0161059781 0.0110033359 -0.0043717831 0.0094502121 -0.0040533661 -0.0013018194 0.0039173967 -0.0031362672 0.0001517726 -0.0001434235 0.0014824864 0.0053874722 -0.0086846165 0.0072742783 0.0022082098 -0.0018647801 -0.0030183956 0.0015682628 -0.0014130574 0.0006274415 -0.0039529582 -0.0034280246 0.0037427594 -0.0030909083 -0.0005608162 0.0014346477 0.0020079885 0.0043846632 -0.0051200530 0.0033488875 -0.0031122872 -0.0034919808 0.0063062989 0.0009218582 0.0013513355 -0.0022275593 -0.0002110006 0.0013722789 -0.0052559078 -0.0004955306 0.0026599867 0.0026241299 0.0091320825 -0.0093558668 0.0053350588 -0.0023652654 -0.0011103535 -0.0025048815 -0.0043683262 0.0005467747 0.0014017339 -0.0013943077 -0.0000682700 -0.0033924386 0.0045228224 -0.0019750427 -0.0023472836 0.0142040478 0.0036803364 0.0049038402 0.0109810129 0.0047772652 -0.0071997191 0.0072976313 0.0130315914 -0.0106695709 0.0000035607 0.0039898735 -0.0118705915 0.0086482362 0.0217554935 -0.0160957522 -0.0046570177 0.0033596747 0.0070831293 0.0055537543 0.0040346891 -0.0056093832 -0.0012073968 -0.0038584875 0.0147055009 0.0037460350 0.0025412154 -0.0082008227 -0.0082965698 -0.0132819495 0.0077725148 -0.0032898567 -0.0048176248 0.0039769013 -0.0039936962 0.0020040696 0.0095198368 -0.0008609615 -0.0004146098 0.0034599609 0.0016503844 0.0100167931 0.0126675149 -0.0012127487 0.0005463789 -0.0015374084 0.0028781120 0.0193439348 0.0073088762 -0.0018354732 -0.0038417440 0.0062973997 0.0015420076 0.0026733850 0.0077208052 -0.0018119112 -0.0097876288 0.0056273197 0.0036174004 0.0020112522 0.0722834702 -0.0014808823 -0.1352105093 0.0305120162 -0.0521661709 -0.3371111445 0.1918148122 0.0695271017 -0.1249887744 0.1649583329 0.0633926685 -0.0893924829 -0.0700655528 -0.0764540818 0.0187984650 -0.0370910627 -0.2696069663 -0.1760567836 -0.2175887499 0.1573564040 -0.0367229810 0.0440755427 -0.0919064339 0.2566498430 -0.0253852765 0.0114007772 -0.0380835214 0.2003269669 -0.0116977211 0.3370146418 0.0748611480 0.0196640069 0.1800531358 -0.0513906005 0.0783774143 -0.1005463283 -0.0477278934 0.0229418010 -0.1249908743 0.0241850780 0.0141095426 -0.0788471427 0.0422945079 0.0583760012 -0.0559053773 -0.0096303157 0.0214812871 0.0901913640 0.0290041675 0.0072420648 -0.0314813305 -0.0861901864 0.0245681734 0.1655327054 0.0049233357 -0.0445918092 -0.0406550613 -0.0289311621 -0.0346421927 -0.0480821049 -0.0161540516 -0.0488629969 -0.0103149475 0.0563266341 -0.0518247215 0.0542492261 -0.0742762021 -0.0928713161 0.0901299345 -0.0054643753 -0.0116280435 0.0197310684 -0.0367163751 0.0077614588 -0.0078826019 -0.0147519581 0.0010781430 -0.0033193368 0.0206175251 0.0000140654 -0.0023024832 0.0135556753 -0.0198886715 -0.0019134040 -0.0090426976 0.0101868110 0.0028776239 0.0252253565 -0.0020224990 0.0094763024 0.0149889315 -0.0050850343 -0.0115630999 0.0136659464 -0.0344315457 -0.0063478189 -0.0265922417 0.0239590649 0.0052274537 0.0364648633 0.0017957513 0.0188749908 -0.0033183526 0.0009394840 -0.0041558659 -0.0043949685 0.0033623517 -0.0070466227 -0.0083777779 0.0076809397 -0.0046852015 0.0011722214 0.0004080727 -0.0008008424 -0.0016621244 0.0051594746 0.0061955974 0.0051747608 -0.0009607499 0.0039811827 0.0013835389 -0.0018178307 0.0052379711 0.0008496858 -0.0009992957 0.0058761294 0.0024289007 0.0014874880 0.0043114313 0.0044303163 -0.0018103903 0.0064690535 0.0058690540 -0.0044891862 0.0098551299 0.0038245486 -0.0037602638 0.0042549077 0.0007960443 0.0011180023 0.0023297358 -0.0052125631 0.0093275071 0.0052359811 -0.0001607578 0.0137872808 -0.0240822815 -0.0141096763 -0.0088696424 -0.0143179803 -0.0148681232 -0.0534160293 -0.0437563977 0.0052898674 -0.0002975827 0.0015456802 0.0016603478 -0.0016742448 -0.0024908740 -0.0102342962 -0.0002557339 -0.0005998406 -0.0015149293 -0.0054976750 -0.0016631309 -0.0006972364 0.0014074689 0.0021753537 -0.0025958713 0.0030084512 0.0034518497 0.0015237447 -0.0013848934 -0.0020004164 0.0026556334 -0.0034381430 -0.0079234750 0.0134239476 0.0050424694 -0.0037873867 0.0038549524 0.0137146602 0.0016092835 -0.0060487264 0.0010610998 0.0120185154 0.0022445437 -0.0010499069 -0.0028264379 0.0063437243 0.0121883019 0.0063466111 -0.0027170391 0.0030658227 0.0034156573 -0.0151613302 0.0069763517 0.0038202327 0.0050045809 -0.0012723445 -0.0063493779 0.0012206049 0.0005618069 -0.0012801872 0.0004069905 0.0024150882 0.0001798271 0.0175930040 0.0056642880 -0.0071584566 0.0218745135 0.0083592007 -0.0084108752 0.0104499434 0.0091152838 0.0079637533 -0.0074569409 -0.0693156485 -0.0780574367 -0.0385581096 -0.0929803065 -0.0348819270 -0.0569697091 0.0108987294 0.0215390259 -0.0209191133 0.0946298464 0.0078148693 0.0506048173 0.0385800626 -0.0023387881 0.0661565802 -0.0695184447 -0.0552923279 -0.0695813855 -0.1737204568 -0.0234005933 -0.1040097128 -0.0031741492 0.0789595505 -0.0049823520 0.0313445447 0.0052205348 0.1174235036 0.0630502340 0.0213633397 0.1474524019 -0.1153360648 -0.0808024375 -0.0098851638 -0.0871169540 -0.0147043257 0.0375449076 -0.0035075883 0.0091381308 0.0462988991 0.0819431191 -0.0071443790 -0.0200962088 0.0344538058 -0.0009790819 -0.0707756004 -0.0557590204 -0.0213044587 -0.0174847450 -0.1575529287 -0.0049693846 0.0657552473 -0.0250607738 0.0458204267 0.0107302870 0.0279627873 -0.0020523203 -0.0533944210 0.0569543111 0.0151065122 -0.1406649065 -0.0854509681 -0.0295432735 -0.0284473614 -0.0399846802 0.0009794675 0.0427829099 -0.0225359802 -0.0170029606 0.0029400363 -0.0330415853 0.0011768694 -0.0386044112 -0.0101541167 -0.0080235246 -0.0315853329 0.0961394351 0.0583527726 -0.0589623879 0.0955594597 -0.0774167585 -0.1409585657 0.0626784521 0.0118494998 -0.1291016041 0.0115838561 0.0225254233 -0.2216379954 0.0821772028 -0.0106764480 -0.1807195584 -0.0138146950 -0.0123734460 -0.0185069091 0.0569848310 -0.0169428575 -0.0080069660 -0.0122073603 0.1104726413 0.0297362945 0.0455514515 -0.0276324756 0.0762606568 -0.0844708857 0.2106955673 0.0620665037 0.0515828294 -0.0198377028 0.0638120022 0.0562199346 0.0536469119 0.0435476301 0.0410671591 0.0172006142 0.0420675249 -0.0046732641 0.0781354164 0.0151725750 0.0425420615 0.0080481852 -0.0139848735 -0.0397625240 0.1195856048 0.1258098386 0.0131930917 0.0361326565 0.1187959296 -0.0125002869 0.0349095829 0.1767790292 0.0094647323 0.0246698936 0.1467056457 -0.0368457986 0.0077964457 -0.0102264646 0.0023311515 0.0094020206 -0.0092456122 0.0089501980 0.0240920400 -0.0173880236 0.0029624406 0.0138109474 -0.0216199694 -0.0037785022 0.0009552546 0.0022187623 0.0060669471 0.0030655065 0.0018826753 0.0010831158 -0.0014916372 -0.0086414778 0.0135730505 0.0049323498 0.0088728118 0.0074785107 0.0123301350 -0.0540795795 0.0490108851 -0.0455843671 0.0574304854 0.0754512491 0.0319892535 -0.0068646273 0.0896321603 0.0008902367 -0.0356490066 0.0175044094 -0.0753836319 -0.0399659954 0.0275693092 -0.1009908315 -0.0385012835 -0.0180141068 0.0177036606 -0.0541973346 -0.0362108031 0.0466003930 0.0960020297 -0.1213486859 -0.1754679013 -0.0083145583 -0.0292570552 -0.0064239385 0.2312287758 -0.1270583632 -0.2863746659 -0.0246665090 0.0250847130 -0.0688637031 0.0524835465 0.0684697462 -0.0635772272 0.0122264420 0.0039067546 -0.0354917310 0.0792763653 -0.0392476603 0.0857713233 0.0329345707 -0.0573700820 0.0159659113 -0.0078856811 0.0017171052 0.0003700590 -0.0231738563 0.0157664308 -0.0150416782 -0.0082633295 0.0052524086 -0.0078518775 0.0048699945 -0.0028227201 0.0002037523 0.0099391017 -0.0101067531 0.0014937804 -0.0017539609 0.0024595921 -0.0032954316 0.0129364756 -0.0093146185 0.0054337573 0.0069778800 -0.0078931997 0.0001692199 0.0121638139 -0.0124045021 0.0026966768 -0.0088873884 0.0082411626 -0.0061811644 0.0186997322 -0.0134386505 0.0088104899 -0.0089079902 0.0138053393 -0.0107708054 -0.0090373706 0.0087506100 -0.0055013180 -0.0089323366 0.0079715826 -0.0051160331 -0.0055218141 0.0022298631 -0.0004168907 -0.0035519617 0.0069000004 0.0037477211 -0.0001776518 -0.0016116838 0.0056548136 0.0002989585 -0.0060793240 0.0035771274 -0.0030706606 0.0022522072 0.0018656425 0.0044720059 -0.0051934480 0.0072908932 -0.0010554860 -0.0025271507 0.0087135484 0.0114817051 -0.0168472164 0.0099361578 -0.0006845258 0.0012273212 -0.0017777370 0.0099504634 -0.0122475595 0.0094533247 -0.0057133115 0.0133844902 0.0021730696 -0.0051190759 0.0029056119 -0.0024283611 0.0136689514 -0.0196834705 -0.0004209286 0.0073851773 0.0342064722 0.0912677000 -0.0027477220 0.0064154330 -0.0079630525 0.0011848383 0.0011339255 -0.0052886627 0.0035494757 -0.0015943843 -0.0038868145 -0.0022834645 -0.0016781664 -0.0000135793 0.0016971659 -0.0023366932 -0.0004913500 -0.0013252382 0.0032508992 0.0002018556 -0.0002676918 0.0006522035 0.0004507191 0.0051064386 -0.0045114412 -0.0035340066 0.0072612478 0.0002180693 -0.0053039859 -0.0001594231 -0.0067666509 -0.0003308548 0.0070976301 -0.0026153815 -0.0010361069 0.0005016039 0.0035400994 -0.0012445401 0.0030555740 0.0087021636 0.0003382357 0.0015879329 0.0017186099 -0.0002860824 -0.0054514843 0.0043836758 0.0011654931 0.0037129033 0.0001889183 -0.0017158563 -0.0011570161 0.0034714537 0.0025869765 0.0000629024 0.0025641085 0.0015632464 0.0106083903 0.0007625508 -0.0084089837 0.0074282096 0.0014171393 -0.0052968715 0.0050912943 0.0032318396 -0.0027627361 -0.0019029948 -0.0191985254 0.0198999171 0.0211036405 -0.0571189820 0.0396169085 -0.0081120084 0.0136346750 -0.0019111052 -0.0248325850 0.0736419057 -0.0348678146 0.0056255143 -0.0040335213 0.0146088601 0.0280822321 -0.0496637174 0.0429304678 0.0468148893 -0.0994831729 0.0642047280 -0.0094784257 0.0092673230 0.0037298908 -0.0048205873 0.0259317381 -0.0263277078 0.0112630366 -0.0298157902 0.0258637248 0.0530030101 -0.0828144086 0.0559803232 -0.0298262382 0.0495226268 0.0657342511 -0.0390326204 0.0158682599 -0.0199153076 -0.0101174156 -0.0242871728 -0.0350481351 0.0348420090 -0.0379952693 0.0038317540 0.0461961808 0.0115866259 0.0816456476 -0.0617558318 0.1031881632 0.0778329018 -0.0795205741 0.0401852868 -0.0660315875 -0.0097394524 -0.0054839605 -0.0249116500 0.0825360873 -0.0872230863 -0.0180004168 0.1010793533 0.0038720062 0.1184083114 0.0411991168 -0.0102354586 -0.0131884179 -0.0165358961 -0.0267558642 0.0000804118 -0.0567986768 0.0420203715 -0.0073978264 0.0429122548 -0.0153663532 0.0110447116 -0.0083311775 0.1064905592 0.0357289993 0.0307758304 0.0845961778 -0.0198697186 -0.0504433434 0.0561258062 0.0953261810 -0.0890835660 0.0041819752 0.0031450988 -0.0797948012 0.0649812109 0.1636186306 -0.1475145822 -0.0330299617 -0.0243626943 0.0767164820 0.0477698414 0.0244477352 -0.0123779197 -0.0101656086 -0.0170231571 0.1465197846 0.0338317246 0.0474386095 -0.0045167414 -0.0776801637 -0.0494254919 -0.0339548809 -0.1451304475 0.1087080232 -0.0217144423 -0.1570156009 -0.0308086338 0.0617676481 -0.0689920212 0.1016427598 0.1000866571 0.0507606227 -0.0562754431 0.1618317178 -0.0809105993 0.1448476575 0.2263797041 0.1225473966 -0.1556616268 -0.1310345552 -0.0379121968 0.0166605169 -0.0489289910 0.0712749288 0.0013115693 -0.2679818542 -0.0260768292 0.0146003913 -0.0950190555 0.1563961952 0.0044211357 -0.0141783301 -0.0065823202 0.0065697696 -0.0083672246 -0.0019149536 0.0305537485 -0.0281622557 -0.0183325656 0.0020537640 -0.0219463252 -0.0143711743 0.0053262383 0.0031740367 0.0060064049 0.0156674961 0.0243187135 0.0046449320 0.0102269445 -0.0259534940 0.0094619380 0.0298409783 0.0170067799 0.0080068039 0.0365106001 -0.0210153772 -0.0148571758 -0.0324134091 -0.2035861102 -0.0636444732 -0.1492670900 -0.1173607720 -0.0833748447 -0.1159888792 0.0191779177 -0.0321428366 -0.0145961636 0.0086080968 -0.0153946335 -0.0601991010 0.0309332695 0.0095030198 -0.1253840970 0.0336494643 0.0145689116 -0.0853514063 0.0833512450 0.0635851807 -0.0606610388 0.0798878361 0.0255632478 -0.0577811956 0.0342141574 0.0701960736 -0.0704408790 -0.0511081163 0.0625402274 -0.0958666264 0.0452447427 0.0225859351 -0.1019288877 -0.0293079791 -0.0167130738 -0.0380211480 -0.0015093400 -0.0492597923 0.0323150972 -0.1429894419 -0.0812754108 0.1396958004 -0.0110759176 -0.0169082100 0.0301323770 -0.0397987823 -0.0020614771 -0.0011771226 -0.0177289028 -0.0032363032 -0.0003697048 0.0227922239 0.0058380290 -0.0089995957 0.0151656349 -0.0258327767 -0.0049215446 -0.0135128074 0.0128509028 0.0061767227 0.0291896848 0.0030569723 0.0097618486 0.0153346913 -0.0001586997 -0.0213541991 0.0175554238 -0.0516987887 -0.0109221823 -0.0331227331 0.0279827174 0.0136458261 0.0512151437 0.0069687078 0.0274217709 -0.0052789436 -0.0049554699 -0.0036614683 -0.0050188597 -0.0018959811 -0.0058686305 -0.0123486595 0.0047567439 0.0019660196 0.0075083637 0.0036540428 -0.0023753930 -0.0000085783 0.0011395713 0.0065810530 0.0082732011 0.0046053629 -0.0013598351 0.0039645789 0.0061927921 0.0053489088 0.0008040801 0.0016141900 0.0080198335 0.0022631711 0.0032542584 -0.0006930554 0.0084788129 0.0044357308 -0.0016097704 0.0088063114 0.0068686757 0.0128761419 0.0012421570 0.0001851829 0.0098768236 -0.0016107264 0.0014307034 -0.0061174872 -0.0031256299 -0.0016116200 0.0073965787 0.0036865761 0.0193259618 -0.0325579588 -0.0389950952 0.0014830247 -0.0171574787 0.0052133626 -0.0114160736 0.0596761434 0.0003059260 -0.0072752315 -0.0004625388 0.0033905939 -0.0040266077 -0.0024781690 0.0083673368 -0.0020847845 -0.0076869543 -0.0009717587 0.0009360902 0.0000192529 0.0010950309 0.0007481369 0.0004753442 -0.0008636143 0.0011799561 0.0018026340 -0.0001860818 0.0017685420 0.0007822347 0.0032882673 -0.0022391311 -0.0051432004 0.0051921328 -0.0015526896 -0.0058564648 0.0050236046 0.0030931828 0.0039087030 -0.0017530895 0.0006966993 -0.0002326588 0.0040282920 -0.0034329429 -0.0035717067 -0.0009226312 0.0036053117 -0.0012541868 0.0002218920 -0.0059765002 -0.0005449273 -0.0002396120 0.0010072292 0.0061846637 0.0047307781 0.0012858164 -0.0020497285 -0.0009571122 0.0053473144 0.0025992882 -0.0002701148 0.0041815829 0.0021534449 0.0055923067 -0.0015022635 -0.0067320967 0.0066159883 -0.0008980906 -0.0065591461 0.0047686439 -0.0009779950 -0.0036541691 -0.0002900165 0.0382930590 0.0853084930 0.0431009097 0.0286651701 0.0664824636 0.0364329221 0.0009189864 -0.0189642681 -0.0027326019 -0.0121330156 -0.0380587497 -0.0374437412 -0.0330693693 0.0152650075 -0.0288983024 0.0141536024 0.0881383772 0.0912672804 0.0624133568 0.0774594208 0.0747739680 0.0060068749 -0.0589706349 0.0058865961 -0.0020110470 -0.0322628911 -0.0924713073 -0.0756137788 0.0030892012 -0.0724536415 0.0208024501 0.1213613351 -0.0528315497 -0.0454726222 0.0667778411 -0.0014399726 0.0202895586 -0.0159135306 0.0466189673 0.0737753199 -0.0548026178 0.0162748653 -0.0167035874 0.0121232295 -0.0212569299 -0.0503116345 0.0801165590 -0.1135841840 -0.0677938583 0.0999795726 -0.0177629654 0.0245588466 -0.0290851913 0.0017380462 0.0295903037 -0.0350153269 0.0280349111 -0.0678084547 0.0101751170 -0.0369878880 -0.0934927022 0.1141189459 0.0686224118 0.0247684961 -0.0168347081 -0.0435080225 -0.0048027027 0.0089274085 -0.0706381761 0.0147893407 -0.0077054008 0.0081070123 -0.0326004054 0.0051347535 -0.0397137912 -0.1361340333 -0.0095930077 -0.0284142737 -0.1255392190 0.0787549586 0.0833790253 -0.0628310654 0.0302810580 0.0300244071 0.0609715221 -0.0055122322 0.2086626248 -0.0928604748 0.0298246199 0.0815755235 0.1219612972 -0.0247958220 -0.0741255275 -0.0280686674 0.1099943433 -0.0793554077 0.0806025593 -0.0325095908 -0.1586187262 -0.0086737686 0.1717124090 -0.1555578768 0.1667572508 -0.1070287021 -0.0082336712 0.0824484747 0.0204735047 0.0641369699 0.0870406781 0.0479889940 -0.0489891845 0.0780275474 0.0780075048 0.0573378808 0.0008576662 -0.0316121125 -0.1120448555 0.0847204433 0.1187151039 0.0564699141 -0.0633884742 -0.1123365664 0.0676850752 0.0387534284 0.1443944007 0.1206881132 -0.0078675814 0.0147315727 0.0699379133 0.0389021293 0.2346096541 0.1662056926 -0.0547178072 -0.0240455162 -0.0129738013 -0.0000127496 0.0025888764 -0.0161301252 0.0096702358 0.0124373249 -0.0133343961 0.0041598356 0.0070410324 -0.0252204157 -0.0081838355 -0.0045815235 -0.0036366537 0.0051444853 0.0174866448 0.0074519574 -0.0221963889 -0.0111090098 -0.0471824505 0.0399690915 0.0211625825 0.0254518104 0.0092410939 0.0640788929 -0.0033505050 0.0011041663 -0.0019860245 -0.0012058179 0.0002114058 0.0043369153 -0.0028757653 0.0005849110 0.0017439433 -0.0010921675 0.0008607807 -0.0065088260 0.0008408849 0.0005912912 -0.0048962700 0.0035308986 -0.0005715545 -0.0140888836 0.0022561410 0.0004213911 -0.0080980417 0.0092636297 -0.0024459474 -0.0121716934 0.0053204614 0.0001635522 -0.0068769763 0.0105007317 -0.0023936449 -0.0141676308 -0.0007236542 -0.0024506290 -0.0100768569 0.0097116304 0.0067095873 -0.0025678490 0.0034799776 -0.0035663959 -0.0001793752 -0.0021302978 -0.0102176086 0.0041038352 -0.0090427999 -0.0008992660 0.0074293516 0.0445675407 -0.0388538461 0.0234742130 0.0829000564 -0.0701035686 0.0575868603 0.0304923753 -0.0251279437 0.0267425510 -0.0055907691 0.0093914947 -0.0019192818 -0.0376499259 0.0341971871 -0.0159794984 0.0075473259 -0.0055534220 0.0128111818 -0.0443602966 0.0419265456 -0.0225262623 -0.0189719158 0.0226327947 -0.0090216683 -0.0496940616 0.0413590331 -0.0240453945 0.0306552929 -0.0246308224 0.0291256266 -0.0661475825 0.0593785748 -0.0344071927 0.0418669331 -0.0530647753 0.0444418099 0.0384151047 -0.0355493748 0.0223944063 0.0378587703 -0.0213816170 -0.0002611179 0.0020204657 -0.0147419945 0.0056189699 0.0172830610 -0.0256727414 -0.0125209950 -0.0198226352 0.0085445837 -0.0098694244 -0.0154615534 0.0149954103 -0.0175994233 -0.0034359453 0.0064869805 -0.0187982096 -0.0106935493 0.0072197515 -0.0109856363 -0.0274159887 0.0210339267 -0.0161730052 -0.0286572061 0.0210764089 -0.0292822020 -0.0075633643 0.0122131564 -0.0202120927 -0.0140864262 0.0219811744 -0.0062186954 0.0411734017 -0.0543308177 -0.0058453585 0.0160540917 -0.0043197874 0.0022004340 0.0036901466 -0.0013366920 0.0063512073 0.0014690417 0.0026319545 0.0106181611 0.0356800703 -0.0001610061 0.0645843505 -0.0168921236 0.0108070930 0.0477130515 -0.1125173390 0.0148141247 0.0879996343 0.0040563502 -0.0190140245 -0.0160375037 -0.0122930998 0.0277142253 0.0037098206 -0.0112705273 0.0085130501 0.0065901627 0.0119246343 -0.0192016643 -0.0145451435 -0.0366054033 0.0281933358 0.0249076030 -0.0272453759 0.0279131139 0.0519642790 0.0093072946 0.1202995780 -0.0177522178 -0.0667171666 0.0271783825 0.0869457364 0.0017064966 0.0145622844 -0.0184478039 0.0219128781 0.0296624019 0.0346522871 -0.0395792148 0.0177754650 0.0090209633 -0.0498165390 0.0203578358 0.0104104560 -0.0162793875 -0.0171974482 0.0038685344 0.0114306830 -0.0416144640 -0.0135944058 0.0238493955 -0.0386271656 -0.0252323995 -0.0362557839 0.0253185681 0.0578452889 -0.0083102811 0.0321783671 0.0407983265 -0.0204002316 0.0185468809 0.0643227399 -0.0004856599 -0.0048125672 0.0000843910 -0.0000665393 -0.0085805182 0.0024964382 -0.0041341319 0.0026853338 -0.0009111321 -0.0020944589 0.0066952968 -0.0016745094 0.0012916267 0.0003835114 0.0009841969 0.0024350500 -0.0038433740 0.0005124874 0.0007859121 -0.0132529340 0.0042921200 -0.0102605787 0.0105803532 -0.0030774674 -0.0000443751 0.0025581870 -0.0010014323 0.0032423051 -0.0008390621 0.0023183442 0.0052725775 -0.0051049584 -0.0005923436 -0.0040632295 0.0026571544 0.0089351551 -0.0027930226 0.0025320950 -0.0020424275 0.0026072418 0.0026122776 -0.0057537162 0.0047304589 -0.0031453176 0.0009216721 0.0024798554 -0.0022892125 0.0116578633 -0.0097554518 0.0063932042 0.0115698122 -0.0081369628 0.0033041962 -0.0058610975 -0.0004133448 0.0010405028 -0.0040191053 0.0100581176 -0.0088546351 -0.0015116948 0.0057770718 -0.0057491414 0.0167446598 0.0030667948 -0.0015964933 -0.0000390393 0.0015011560 -0.0031495668 -0.0003160366 -0.0076767510 0.0044810928 -0.0014724294 0.0039307871 -0.0039024470 0.0009828184 -0.0034077369 0.0010767395 0.0032820432 -0.0023027441 0.0004256940 -0.0006997145 -0.0039000614 0.0014316840 0.0052385252 -0.0071128667 0.0038672156 0.0015094276 -0.0020926085 0.0010855600 0.0064210054 -0.0084465996 0.0044856047 -0.0013267786 -0.0019133340 0.0032397631 0.0044586593 -0.0044099593 0.0033208807 0.0026762640 -0.0019979648 0.0033259989 0.0079823130 -0.0038283023 0.0015599154 0.0026028941 -0.0017537897 -0.0016148977 0.0055015470 0.0023670179 -0.0020400349 0.0018809688 -0.0026382392 0.0014298204 0.0124032335 0.0075527972 0.0024268060 -0.0053035265 -0.0034850380 0.0014547670 0.0188193746 0.0139931686 0.0021593067 -0.0154161017 -0.0038372236 0.0010521440 0.0115328954 0.0054813443 0.0027947154 -0.0016417332 -0.0112750966 0.0016977892 0.0188484246 0.0076903747 0.0035348863 -0.0064896558 0.1321994978 0.0481988269 -0.0155171930 0.1285288390 -0.0299017578 -0.1731053975 0.1834179582 0.0958067582 0.0056155810 0.2214140817 0.1353301329 0.0000305430 0.0240446893 -0.0848349644 -0.1983837151 -0.1400557699 -0.0084096838 -0.0926541266 0.3747371080 -0.2017509297 -0.3208724624 -0.2011422021 -0.1571011961 -0.4777666505 0.0502831193 0.0088704933 0.0863708358 -0.0052886205 0.0188542972 0.0515087494 0.0445760295 0.0068240588 0.0838107199 0.0611705904 -0.0187074445 0.1029343999 0.0758528189 0.0287147675 0.1846449281 0.0564627161 -0.0470627974 -0.1562278952 0.0508781069 -0.0030461829 -0.0658440546 0.0317620393 -0.0149393853 -0.0877310916 0.0312254943 -0.0277907516 -0.0693005790 -0.0123728396 -0.0119115683 -0.0733333711 0.0420915435 -0.1302731780 -0.0803956365 0.0873138438 0.1298670224 0.0747862821 0.0060388745 0.0094275521 -0.0022924964 -0.1555308764 -0.0996645397 0.0144608910 -0.1113412583 0.1310038931 -0.0310963521 0.0049814334 0.0004236250 0.0088821957 0.0295191852 -0.0146219468 0.0143895812 0.0113006162 -0.0054514496 0.0081364848 0.0007085908 -0.0023226226 0.0079816588 -0.0112906951 0.0120133423 0.0019445536 0.0004009353 -0.0015805063 0.0001813199 -0.0120784900 0.0074840668 -0.0067809306 -0.0066154875 0.0091508297 0.0038365268 -0.0149319029 0.0190812911 0.0009517618 0.0036841323 -0.0041306665 -0.0002410003 -0.0229138716 0.0127746932 -0.0135056050 0.0120405861 -0.0299073556 0.0262985645 0.0087946357 -0.0051141744 0.0044809207 0.0077306123 -0.0048674931 0.0069545032 0.0056152535 0.0037715190 -0.0003380103 0.0007107253 -0.0013536629 -0.0048012376 0.0031942270 0.0021759398 -0.0063761337 0.0060520205 0.0023646996 -0.0020667501 0.0009353712 0.0028786996 -0.0021103596 0.0024272496 -0.0030437218 -0.0060295858 0.0040810018 0.0034273412 -0.0107847985 0.0106742279 -0.0013736911 0.0010555974 -0.0003862457 0.0032686309 0.0003704199 0.0037607062 -0.0067154182 -0.0066680545 -0.0012789217 -0.0042638060 -0.0039393266 0.0085679511 -0.0048787824 -0.0072755775 -0.0265167189 0.0399496018 -0.0128277792 0.0289884655 0.0451366044 0.1042959715 0.0023591390 -0.0172216354 0.0017675994 0.0063312559 -0.0088989572 -0.0047787584 0.0245021516 -0.0007634568 -0.0228597576 -0.0003311607 0.0059395174 0.0046811822 0.0077406712 -0.0156684383 -0.0051086140 0.0024467029 -0.0002055498 -0.0028475840 -0.0036533429 0.0045456458 0.0049086227 0.0041991015 -0.0004474853 -0.0089173368 0.0046006142 -0.0058745115 -0.0106999397 -0.0150612019 -0.0683376806 -0.0043194052 0.0527414068 -0.0166966605 -0.0380053074 -0.0086730098 0.0133883123 0.0137240827 -0.0120228319 -0.0072281800 -0.0166559579 0.0119995040 -0.0134536939 -0.0069760878 0.0143436589 -0.0040007054 0.0045440108 0.0011498015 0.0035769418 0.0046919103 -0.0046757078 0.0084673718 0.0074675505 -0.0025531274 0.0051396676 0.0052976558 0.0028629971 -0.0058044325 -0.0078507742 0.0047400913 -0.0080469859 -0.0107940722 0.0051566465 -0.0066620623 -0.0117183118 0.0166074280 -0.0754392735 -0.1061562370 -0.0407453486 -0.0747370762 -0.0798145534 -0.0460488961 -0.0055959232 0.0182295382 -0.0092237612 0.0439702228 0.0271759680 0.0575637654 0.0369819952 -0.0296127988 0.0646997665 -0.0647575945 -0.1059507563 -0.1076581657 -0.1363916422 -0.0901930794 -0.0970997119 -0.0131962032 0.0718291096 -0.0175290459 0.0148424874 0.0336128891 0.1361286466 0.0946209007 -0.0114509707 0.1387938532 -0.0976697313 -0.1375999020 -0.0147628909 0.0698350319 0.0773724292 -0.0306018054 0.0280143988 -0.0192043141 -0.0240429017 -0.0398624420 -0.0234683435 0.0416540113 -0.0456949142 0.0217716295 0.0808514993 0.0447849695 0.0925949321 -0.0534083882 0.1435401265 0.0914850434 -0.0650045355 0.0668239060 -0.0746352494 -0.0233483616 -0.0092492571 -0.0279720393 0.0968926989 -0.1122089813 -0.0024064747 0.1610065177 0.0640153527 0.1159256824 -0.0777522169 -0.0371680645 0.0200012361 0.0377652199 -0.0057612460 -0.0045181867 -0.0647573003 0.0520234812 -0.0132077897 0.0342850312 -0.0070306366 0.0033261498 0.0005442319 -0.0187049046 -0.0095890245 -0.0179077397 -0.0192140707 -0.0074572305 -0.0562234856 -0.0114083032 -0.1046851053 0.0283413925 -0.0104495116 0.0553858483 -0.1042914502 -0.0018136446 -0.1990932372 0.0765603131 -0.0030216836 0.1148181407 -0.0871202352 0.0054732773 -0.1004315686 0.0106461001 -0.0054847569 0.0576886548 -0.1478086597 0.0166756316 -0.1693297436 0.0483981775 -0.0057676118 0.1244287127 -0.0174554875 0.0262955010 0.0173947323 0.0024267821 0.0199478071 0.0009780925 -0.0804634230 0.0147818882 0.0825435227 0.0041427089 -0.0043668099 -0.0598495892 -0.1307388228 0.0203679612 0.1257007906 0.0418769396 -0.0139990013 -0.1302555798 -0.0466166451 0.0228809544 0.0864664605 0.0118606219 -0.0042234470 -0.0457118298 -0.0812848951 0.0254837936 0.1702237206 0.0454047061 -0.0247444230 -0.0887863799 -0.0171149422 0.0011859477 0.0013627941 -0.0298851206 0.0238786482 0.0105950148 -0.0069315792 0.0148455983 0.0096554899 -0.0404931044 -0.0161002077 -0.0090908417 -0.0288087757 0.0484548779 0.0258622870 -0.0672624115 0.0848126132 0.0695989634 -0.0469608421 0.0147906819 0.0537784764 -0.0003062517 0.0954498327 -0.0090698992 0.0069089904 0.0023250164 0.0104658762 -0.0047888729 0.0024760070 0.0035920382 0.0047074611 0.0003088159 0.0079971045 0.0086473055 -0.0045900960 0.0171374539 0.0080223108 0.0047527007 0.0232713703 0.0021100055 -0.0040166566 -0.0039083055 0.0016879060 -0.0024050106 0.0011468303 0.0001097372 -0.0007672560 -0.0041622859 0.0006988158 -0.0036368190 -0.0008479388 -0.0020074161 -0.0005361517 -0.0055547054 -0.0006735575 0.0008205333 -0.0040878867 0.0102879203 0.0197001383 0.0058058328 -0.0025157312 0.0064344249 -0.0024228130 -0.0086261642 -0.0028014190 0.0068309817 -0.0062145061 0.0110210810 -0.0064351185 -0.0873252172 0.0462687742 -0.0210541782 -0.0988470397 0.0873152909 -0.0592710259 -0.0373876311 0.0361208973 -0.0243282590 -0.0085669271 0.0083081935 -0.0077199098 0.0427613328 -0.0334652168 0.0217163629 -0.0015896037 0.0066055968 -0.0035587245 0.0504775492 -0.0390120493 0.0284390868 0.0225829217 -0.0148243700 0.0076930777 0.0593196206 -0.0480086704 0.0315014263 -0.0172874820 0.0196517459 -0.0148202339 0.0832246079 -0.0575281837 0.0480837164 -0.0838519385 0.0683050693 -0.0552196002 -0.0643525290 0.0346047019 -0.0082704683 -0.0820825762 0.0469323393 0.0211258980 0.0126723279 0.0277686996 -0.0080843456 -0.0247063983 0.0207019782 -0.0038737624 0.0347530786 -0.0104306863 -0.0085086858 0.0335469196 -0.0028691218 0.0120746035 0.0121831609 -0.0129787423 0.0180616904 0.0073049098 -0.0118811143 -0.0108541673 0.0514060014 -0.0238730549 -0.0178892993 0.0411961023 0.0065728622 0.0269476229 0.0115726157 -0.0224807066 0.0367686207 0.0025292425 -0.0241733638 -0.0238199268 -0.0625871030 0.0526116302 -0.0111897161 -0.0102339436 0.0148367269 -0.0208863111 0.0215493243 0.0031305150 -0.0259053605 0.0010290911 -0.0010232020 0.0051172507 -0.0203813056 0.0540619965 -0.0225058131 -0.0152991342 0.0280504935 0.0040264878 -0.0429534575 -0.0005610858 0.0529550943 0.0024513908 -0.0163757824 -0.0118256847 -0.0201638016 0.0565164028 0.0188086236 -0.0054489800 0.0025768139 0.0020468467 0.0115396369 -0.0103953579 -0.0133163945 -0.0038837484 -0.0043005228 0.0297114546 -0.0168856911 0.0096267102 0.0221015109 0.0570594016 0.2166205472 0.0237348455 -0.1818216586 0.0611594421 0.1146547375 0.0392472957 -0.0510233351 -0.0482363893 0.0199480252 0.0155089298 0.0258271015 -0.0260747402 0.0097838926 0.0040810294 -0.0306346089 0.0101968656 0.0033164181 0.0067280280 -0.0087944265 -0.0162456503 0.0133220280 -0.0149509621 -0.0181330321 0.0071996089 -0.0087281458 -0.0125576437 -0.0145986252 0.0084392756 0.0094558579 -0.0295074661 0.0177033276 0.0300135211 -0.0170446130 0.0097234432 0.0153619639 0.0026198633 -0.0048946377 -0.0119780665 -0.0030747877 -0.0042499857 -0.0097619185 -0.0008193601 -0.0043632375 0.0033961998 -0.0003078889 0.0026274205 0.0027370226 0.0066010860 0.0030805643 -0.0038486372 0.0078147597 -0.0075737478 -0.0107331750 -0.0094874683 -0.0112540409 -0.0103866461 0.0006567288 -0.0168465811 0.0140445412 -0.0025150263 0.0006580306 0.0037870704 0.0145314503 0.0097502066 -0.0022903117 0.0155476018 -0.0126534587 -0.0123074785 0.0016583173 0.0029697210 0.0021734157 0.0004434577 0.0010191421 -0.0012473314 -0.0008261167 -0.0021062291 -0.0005280849 0.0038652799 -0.0006742596 0.0005821319 0.0037231095 0.0003629564 0.0042547204 0.0012722538 0.0076591453 0.0020070123 -0.0004150343 0.0025178140 -0.0031081985 -0.0022260475 -0.0005799632 -0.0008727650 0.0083125256 -0.0007318750 -0.0019000578 0.0068036638 0.0014370952 0.0048573331 -0.0100674336 -0.0031216374 0.0016527901 0.0015980197 0.0010170963 -0.0000572525 -0.0020187107 0.0028504243 -0.0011066229 0.0001067287 -0.0000729131 -0.0004628740 0.0018030033 -0.0061790367 -0.0027514142 -0.0006596167 -0.0057579252 0.0022095886 -0.0028971283 -0.0037784850 -0.0166487306 0.0089304874 -0.0022074445 0.0056178561 -0.0076459806 -0.0029830979 -0.0304668928 0.0169267630 -0.0001842988 0.0141670181 -0.0113687395 -0.0018995012 -0.0130195978 0.0026066428 -0.0007367167 0.0048818244 -0.0215987824 0.0000172699 -0.0230893615 0.0051175047 0.0024096009 0.0114805544 -0.0022445547 0.0016386556 0.0014108496 -0.0013913277 0.0011641850 -0.0010529331 -0.0050823901 -0.0000434853 0.0016413430 -0.0023604822 -0.0008464688 -0.0038614115 -0.0070779725 0.0001939518 0.0018505524 -0.0003415883 -0.0008288405 -0.0069776469 -0.0035976263 0.0011821388 0.0014130529 -0.0029259116 -0.0007575268 -0.0026620644 -0.0041842559 0.0011825893 0.0043432244 -0.0019944159 -0.0020116152 -0.0032334499 0.0221558732 -0.0138589930 -0.0068613917 0.0604929794 -0.0669703286 -0.0055994947 -0.0156295585 -0.0664490445 -0.0395104254 0.0774777442 0.0196768605 0.0264199975 0.1014318444 -0.1672771751 -0.0139574961 0.3268716621 -0.4400545574 -0.3270560000 -0.0166283164 0.1105048505 -0.1061253469 0.1243863804 -0.3360979353 0.3503495159 0.0227165865 -0.0207833658 0.0710249423 -0.0284263849 -0.0021494034 -0.0338677483 0.0075326670 -0.0114060771 0.0239584543 0.0877617947 -0.0524107194 0.1821133954 0.0589380578 -0.0175428329 0.0923718785 -0.0921548689 -0.0049256835 0.1281591907 -0.1104795356 -0.0198269880 0.1986762199 -0.0125739460 -0.0037971611 0.0291357595 -0.0370563978 -0.0180069738 0.0870666838 0.0239523603 -0.0011731121 -0.0579906454 -0.0989788255 0.2052854929 -0.1283766182 0.1432353549 0.1694007788 -0.1411194285 -0.0101327563 0.0357223695 -0.1170652322 0.0757543723 -0.0452013602 0.0782681927 -0.0851048400 -0.0856976869 0.0961689570 -0.0151461194 -0.0875110194 0.0942961783 0.0097176808 -0.0193029545 0.0159697450 0.0016476466 -0.0089655076 0.0088326222 0.0180942135 0.0043737132 0.0048971778 -0.0038417069 -0.0034816462 -0.0004464360 -0.0068204141 0.0066086784 0.0045729110 0.0119284498 0.0112928581 -0.0032359727 0.0052749512 0.0147906466 -0.0116397290 -0.0042802928 -0.0156025336 -0.0046363756 -0.0161458500 0.0137285492 0.0124509773 0.0179826821 0.0207477841 0.0040668628 -0.0100722848 -0.0575315985 0.0508001417 -0.0174550380 0.0099087791 -0.0014138619 -0.0363889191 0.0412612210 -0.0045549402 -0.0010760864 0.0164590354 -0.0041233236 -0.0081529076 0.0075766700 -0.0073815217 -0.0000850866 0.0110230748 -0.0095696160 0.0208856892 -0.0121683999 0.0032875617 -0.0053150155 0.0114924504 -0.0022815385 0.0142757143 -0.0219396212 -0.0029309836 -0.0022583959 0.0183654752 -0.0180207833 0.0507944850 -0.0430667794 0.0201937041 -0.0111104784 0.0168600876 0.0010520833 0.0318110646 -0.0508769875 -0.0001645299 -0.0177050816 0.0141427007 -0.0088271564 0.0244163651 0.0083300186 -0.0469758410 -0.0245696820 0.0108196990 -0.0364481427 -0.0162461090 -0.0379685813 -0.0452945207 0.0000277385 0.0036529462 -0.0020443282 -0.0011617114 0.0025152222 0.0006788664 0.0034486142 -0.0025359130 0.0025524947 -0.0024821801 -0.0008925029 -0.0001493925 0.0024701811 -0.0071544793 -0.0033309835 -0.0020918382 0.0010762530 -0.0003940380 -0.0009610332 0.0004732884 0.0010291279 0.0005093777 0.0021389958 0.0020136133 -0.0035229874 0.0008349325 0.0010334149 -0.0058411151 -0.0222863541 -0.0045076842 0.0276520574 -0.0083683703 -0.0058958810 -0.0050164084 0.0149131979 0.0003503243 0.0015417038 0.0047800785 0.0002801506 -0.0016109211 -0.0031958877 -0.0018387658 -0.0044809488 0.0018889559 0.0044668224 0.0022614321 -0.0004109663 0.0014382752 -0.0025486373 0.0030514423 0.0048000889 0.0016788819 -0.0002935285 0.0006873446 -0.0044921975 0.0002237142 -0.0007957274 -0.0054132335 0.0012706251 0.0021316293 -0.0021568783 -0.0008705559 -0.0020366215 0.0045349367 -0.0423708117 -0.0230808604 -0.0133291630 -0.0336133430 -0.0269224188 -0.0267062391 0.0168937829 -0.0133863927 0.0008106983 0.0040922566 0.0081506486 0.0219964511 -0.0079792827 -0.0023261312 0.0120591394 -0.0130371009 -0.0390317322 -0.0297161430 -0.0517768839 -0.0284711766 -0.0553620278 0.0406551787 -0.0086806949 -0.0005256505 0.0025650461 0.0116789662 0.0468671215 -0.0023476328 0.0076934162 0.0284702951 0.0039324583 -0.0676624509 0.0071635830 -0.0402277396 -0.0440027458 0.0266111618 -0.0026968358 -0.0052582084 -0.0009833704 0.0031769084 0.0154142317 -0.0268348023 0.0067442225 -0.0069665532 -0.0244305107 -0.0112027945 -0.0552524535 0.0246681395 -0.0725550175 -0.0505168850 0.0639441340 0.0018250378 0.0119043256 0.0037340214 0.0021873300 0.0185331792 -0.0546226751 0.0325276896 0.0058013527 -0.0485922481 0.0036208534 -0.0802911771 -0.0212271620 -0.0072636575 0.0068080320 0.0170850807 0.0001268108 -0.0016004867 0.0325614873 -0.0191822191 0.0080327465 -0.0233336640 0.0119473540 -0.0018951501 -0.0064677330 -0.0190992428 -0.0186940139 0.0365965536 -0.0246770590 0.0666232889 -0.0537699029 -0.0061269306 -0.1142544500 0.0575853598 -0.0144712312 0.0854985209 -0.1092399854 0.0045206031 -0.2305396936 0.1192240007 -0.0146462532 0.1762636681 -0.0735178787 0.0016321377 -0.1001212240 0.0037043671 -0.0048529913 0.0178896990 -0.1669797084 0.0185206575 -0.2140060703 -0.0039151174 0.0018611549 0.0087894326 -0.0409594091 0.0015849734 0.0682998179 0.0105785020 -0.0036522409 -0.0115051014 0.0791364806 -0.0075254930 -0.1129983817 0.0010218787 -0.0065296225 0.0279770331 0.1705433474 -0.0182369093 -0.2392362663 -0.0016564511 -0.0145091804 0.0217847573 0.0774051538 -0.0169715862 -0.1138156959 -0.0415668452 -0.0014644367 0.1040973082 0.1495425854 -0.0228021827 -0.2371896852 -0.0999541919 0.0089964741 0.2036801788 0.0022586839 -0.0038142355 0.0007211282 0.0046722887 -0.0049976357 0.0053385745 -0.0018431784 -0.0119379158 -0.0053104685 0.0044177611 -0.0060020038 0.0063221108 -0.0134794135 0.0283699594 -0.0104671920 -0.0435649657 0.0885938361 0.0543922944 0.0231494917 -0.0403531651 0.0088866961 -0.0373815450 0.0436164353 -0.0846882804 -0.0023265381 0.0123549690 -0.0064450526 -0.0145204101 0.0044365098 0.0128018593 -0.0036530446 0.0024188655 0.0017933404 -0.0182846175 0.0044955025 -0.0392371092 -0.0055197436 0.0141098739 0.0036853216 0.0048473320 0.0100891153 -0.0006881498 0.0151095282 -0.0007316776 -0.0396338932 0.0064832244 -0.0001827210 0.0021913766 0.0082687754 0.0098970244 -0.0061512748 0.0167124673 -0.0019175899 0.0135224714 -0.0068225324 0.0139053625 0.0448169072 0.0072227039 0.0097542480 0.0508326029 -0.0104700166 -0.0178073705 0.0262207864 0.0267484089 0.0401567023 -0.0192271038 0.0191922939 -0.0059676208 -0.0237260497 -0.0712375189 -0.2846004022 0.3014156831 0.0998016925 -0.0243154753 0.0132414967 0.0350701942 -0.0167888164 0.0078845191 0.0203277461 -0.0037767855 0.0616890593 -0.0314380754 0.0198426822 0.0343359192 -0.0066054457 -0.0003251666 -0.0247096925 0.0043831335 0.0037918702 -0.0327264384 -0.0072904014 0.0484763631 0.0180748986 -0.0227274417 0.0422021850 0.0485711745 -0.0203751733 0.0111499046 -0.0287635869 -0.0103170375 0.0112619322 -0.0400630992 -0.0741970964 -0.1979285092 0.2203917982 -0.1087427811 0.1274019795 -0.0165902719 -0.1786019204 0.2456677385 -0.0311435967 -0.0272082081 0.1023200969 -0.0194083384 -0.0676282067 0.0751381789 -0.0511733331 0.0285827986 -0.0056390052 -0.0330839939 0.1019181044 -0.0747900041 0.0191787787 0.0201124697 -0.0069715893 0.0018485887 0.0577057087 -0.0952786087 -0.0187229813 0.0587367764 -0.0231121657 -0.0619588368 0.1712305571 -0.1661081352 0.0469361167 0.0128189787 -0.0163168106 0.0348868810 0.1268677482 -0.2039132278 -0.0047259974 -0.1624049012 0.1773547176 -0.0751203759 0.0873513797 -0.0150019935 -0.1977783332 0.0143625796 0.1264822351 -0.2272745824 0.0030773850 0.0025538349 -0.0032761610 -0.0299401815 0.0791279457 -0.0641727614 -0.0252025127 0.0421467376 -0.0168935604 0.0184430027 -0.0119010776 0.0166853142 -0.0056145214 -0.0152661336 -0.0031913967 0.0029681162 -0.0093086310 0.0011625594 -0.0119226504 0.0000330172 -0.0062065518 0.0043680456 -0.0032773062 -0.0030894743 0.0024540217 0.0060353606 0.0441601884 -0.0460372019 0.0019912447 0.0222457262 0.0010358156 -0.0064371156 -0.0009861923 0.0315819695 -0.0119937958 0.0268400867 -0.0014436108 0.0296080265 -0.0112605507 -0.0039392418 0.0104831521 -0.0062687484 -0.0088601392 -0.0042271231 -0.0075105031 -0.0268947483 0.0043326984 -0.0011116347 0.0255419437 -0.0066457139 -0.0106986172 -0.0010183822 0.0132573693 0.0092627813 0.0072187136 0.0029775135 0.0006977181 -0.0525211765 -0.0025375029 0.0046420716 -0.0819604379 0.0057576064 0.0434157223 -0.0364645003 -0.0103659288 -0.0180713909 0.0007632947 0.0037243793 -0.0049806115 -0.0047971946 0.0089361405 -0.0061645722 0.0045464259 -0.0102242151 0.0083366917 -0.0043956656 0.0094186074 -0.0027956702 -0.0025129294 0.0123513925 -0.0068657703 0.0100919309 -0.0147114762 0.0049929431 -0.0125326798 0.0193171876 -0.0126924210 0.0068664754 -0.0207166501 0.0155672437 -0.0035296693 0.0026425371 -0.0019921285 -0.0025304871 0.0229353519 -0.0105739342 0.0212119015 -0.0354682714 0.0158461211 0.0058894338 0.0045685599 -0.0044162569 -0.0079838276 -0.0134922660 0.0070309803 0.0049789610 0.0075388969 -0.0029567156 0.0062586790 0.0099360910 -0.0048685276 -0.0128754761 -0.0152147017 0.0066130785 0.0108609420 0.0082060006 -0.0073320200 -0.0199677136 -0.0324202138 0.0176357487 0.0025091752 0.0028425591 -0.0017220200 0.0117083226 0.0196073702 -0.0088929410 -0.0284028447 -0.0342471563 0.0165817023 0.0013305705 -0.0023406207 0.0004955650 -0.0045888856 -0.0050519843 0.0021605783 -0.0028849946 -0.0008304543 -0.0000224897 -0.0001089918 -0.0017565988 -0.0002784863 0.0044009966 -0.0133663846 0.0047023872 -0.0137214223 -0.0095081137 -0.0158959760 0.0213924737 -0.0086596039 0.0144516903 -0.0026890292 0.0050692084 -0.0248591206 0.0411229124 -0.0131530089 0.0295507642 -0.0111278246 0.0124757197 -0.0490228829 0.0058470920 -0.0071906620 0.0216401433 0.0027299954 0.0046689581 0.0010442494 0.0156404686 -0.0085606501 0.0492732912 0.0055875873 0.0135180472 0.0122016012 0.0078621395 -0.0131996389 -0.0154193843 -0.0058724189 -0.0119941131 0.0053564255 -0.0062620102 -0.0033370359 0.0214561138 0.0008283358 0.0071884317 0.0018569825 -0.0133392388 -0.0026156916 0.0480704383 0.0007844569 0.0144731736 0.0115355970 -0.0195339278 -0.0017566488 0.0151259951 0.0072958170 0.0064119786 -0.0214826902 -0.0402846054 0.0000399281 0.0283018955 0.0169678950 0.0113288450 -0.0444868744 -0.0087419953 -0.0462585629 -0.0101533312 0.0375712069 -0.0700653866 0.0712579648 -0.0768970661 -0.1573287521 -0.0860260193 0.0233969195 -0.0621035865 0.0538323453 0.0174501318 0.0472806516 -0.0097377179 0.1011486213 0.1622011644 0.0846326160 0.0532712461 -0.1113699753 0.0615109780 -0.0399337583 0.0179870623 -0.0641606938 0.0299554582 -0.0398512382 0.0617628073 0.0180947413 0.0204351616 -0.1464670682 0.0167328790 0.0177339323 -0.0437478429 -0.0177175341 0.0036215811 0.0382293831 0.0023738291 -0.0304797065 0.0810430768 0.0096990579 0.0242856867 -0.0822023016 -0.0213991676 0.0014351345 -0.0341304183 0.0122889393 -0.0240877627 0.0404263572 0.0450427934 0.0231571638 -0.0614858716 0.0028083988 -0.0306784581 0.1422403004 -0.0553494297 0.0856240212 -0.0205083878 -0.0733187904 -0.0649838195 0.0231960542 -0.0090074987 -0.0018050207 0.0008539686 0.0215626601 0.0260587755 -0.0101233023 0.0081313872 -0.0250694878 0.0092496706 -0.0033393080 -0.0169657492 0.0164764322 0.0018320061 -0.0018917104 0.0007107607 0.0001191201 -0.0011639224 0.0002151871 0.0006399349 0.0009725250 0.0004937548 -0.0004624796 -0.0008683225 0.0006419928 -0.0013557867 0.0003457477 -0.0007550745 0.0014765550 0.0002866720 -0.0010892755 0.0000626991 0.0025431249 -0.0012130289 0.0006387884 -0.0025984292 0.0010342317 -0.0024574942 0.0011964481 -0.0001461917 0.0024865039 0.0012618566 -0.0001348823 -0.0046891334 -0.0068856979 0.0070510599 -0.0057133331 0.0046578994 -0.0018598109 -0.0090210785 0.0101277249 -0.0023193653 -0.0020371525 0.0046168510 -0.0014431273 -0.0030239466 0.0025193037 -0.0014533412 0.0169233386 -0.0237178212 0.0046712407 -0.0129697095 0.0204859590 -0.0050710419 0.0162714278 -0.0234953467 0.0061617533 -0.0133477286 0.0179922968 -0.0057738352 0.0394910945 -0.0539301375 0.0123296026 -0.0276780851 0.0425185614 -0.0090976665 0.0347560746 -0.0508647818 0.0139516599 -0.0292338870 0.0399583128 -0.0109112711 -0.0074284101 0.0072296007 -0.0025742271 0.0041114888 0.0001453302 -0.0077668973 -0.0013375206 0.0041729368 -0.0069058003 0.0251014297 0.0216195161 -0.0047913395 -0.0022172202 0.0049228029 -0.0033053216 -0.0017666569 0.0007638699 -0.0000915254 -0.0010889671 -0.0032802625 0.0044377408 -0.0008511806 -0.0007640744 -0.0014989696 0.0000570012 0.0011115334 -0.0011050520 -0.0025620527 0.0011586523 0.0039402541 0.0007007409 -0.0003768062 -0.0003433084 -0.0008366354 -0.0014122950 0.0001225231 0.0001125496 0.0015525844 0.0000149667 0.0031078500 0.0073274253 -0.0003295240 -0.0008017495 0.0007924213 0.0049229693 0.0022675417 0.0017475578 -0.0062071263 -0.0013522338 0.0054145274 0.0007728844 -0.0054410906 -0.0095720561 0.0005159688 0.0022317094 0.0004047778 0.0115514619 0.0047898812 -0.0012889535 -0.0006168592 -0.0013275365 0.0024077445 0.0044565119 0.0041138614 -0.0006853899 -0.0004053838 0.0006820524 0.0013292789 -0.0027228096 0.0013808672 0.0038884188 -0.0004655383 -0.0001263429 0.0018920439 0.0027351896 0.0106965495 -0.0347208751 0.0114556297 -0.0308332189 0.0587326489 -0.0467127658 0.0076290263 -0.0280890494 0.0041886602 0.0185316151 -0.0505025686 0.0215288445 -0.0332494755 0.0531691334 -0.0380926605 -0.0050810851 -0.0153331267 -0.0042038620 -0.0692254309 0.1450355778 -0.0905949027 0.0090665224 -0.0359724306 0.0100607616 0.0139011199 -0.0181556792 0.0230958741 -0.0740148163 0.1427980222 -0.0885999878 -0.0064588947 -0.0157142247 -0.0036286175 -0.1108640267 -0.1518894190 0.0879673134 0.0925422825 0.1245858775 -0.0581787612 0.0354663808 0.0531686618 -0.0224116818 -0.1003438529 -0.1388339247 0.0807061447 0.0801763665 0.0996831507 -0.0386438818 -0.2542431253 -0.3350017379 0.1771314004 0.1830421480 0.2499482428 -0.1219049024 0.0084389191 0.0210219703 -0.0170048610 -0.2380090315 -0.3374842569 0.1764384054 0.1583945376 0.1995467644 -0.0926819914 -0.0227447035 0.0058747016 0.0133958321 0.0290812922 0.0224971573 -0.0016233899 -0.0219455911 0.0036401543 -0.0059850192 -0.0049924329 -0.0219011764 0.0004671462 0.0128852070 0.0530969747 -0.0170276763 0.0242736905 0.0453331285 0.0142330027 -0.0105025631 0.0216954786 0.0070374129 0.0062548724 -0.0304657155 0.0133017662 -0.0460835835 0.0309443809 0.0400415157 0.0021135866 -0.0547966836 0.0452529186 0.0346968500 0.0050953621 -0.0199803872 0.0043709681 -0.0306744833 -0.0268818096 0.0750731969 -0.0040165666 -0.0432001762 -0.0011513733 -0.0511354370 -0.0514690114 0.0055218912 -0.0451532800 -0.0158674974 -0.0001708337 -0.0504560315 0.0137112559 0.0255287264 -0.0121386565 0.0188204499 0.0119253515 0.0276565940 0.0228005405 0.0635636074 -0.0165615902 0.0405314989 0.0132297009 0.0446176385 0.0434258738 -0.0142946256 -0.0133630246 -0.0042543137 0.0162951562 0.0274697158 -0.0109126060 -0.0516696363 -0.0100328558 -0.0326507340 0.0200521272 0.0485158298 -0.0386673029 -0.0000147257 -0.0028076007 -0.0003018688 0.0031741255 -0.0049771451 0.0041379485 -0.0044960970 -0.0097651761 -0.0049840201 0.0026512983 -0.0030687585 0.0036874057 0.0016211048 0.0008168478 -0.0004065050 0.0048769846 0.0157357591 0.0132383027 0.0103124953 -0.0167385555 0.0048654620 -0.0072212414 -0.0004279219 -0.0144893649 -0.0072378034 0.0064318712 -0.0175049392 0.0057225207 -0.0058071195 0.0335678493 -0.0005981985 -0.0036792976 0.0083871281 0.0004821841 0.0007318708 -0.0077635957 -0.0054972591 0.0034774235 -0.0219326613 0.0013398708 -0.0064161085 0.0160839938 0.0044309735 -0.0001365002 0.0114363609 -0.0052393278 0.0058431990 -0.0072897786 -0.0074079715 -0.0058294199 0.0069096127 -0.0100711885 0.0073472323 -0.0228686911 0.0176900439 -0.0293705500 0.0085267019 -0.0003132330 -0.0035838999 -0.0022940435 0.0055421233 0.0038648632 0.0023081936 -0.0179550252 -0.0088172473 -0.0016975996 -0.0015136406 0.0072436169 0.0056641722 0.0119393250 0.0251831901 -0.0377374869 -0.0131241329 0.0021124387 -0.0014295428 -0.0048577317 0.0013907338 -0.0008890020 -0.0009988822 0.0007634093 -0.0075702091 0.0042554309 -0.0034967271 -0.0044101792 0.0005002571 0.0001129548 0.0032581192 0.0017154285 -0.0004240053 0.0041806927 0.0018167833 -0.0048462329 -0.0036858673 0.0032690585 -0.0078497415 -0.0066176090 0.0014697429 -0.0007902969 0.0046025785 0.0057934427 -0.0010075790 0.0070733012 0.0100365523 0.0193324804 -0.0233940252 0.0131809074 -0.0068984639 0.0010990772 0.0184996832 -0.0144160190 -0.0001512631 0.0068321289 -0.0183341549 0.0044189518 0.0112303061 -0.0080751817 0.0084802418 -0.1166681303 0.1674064408 -0.0366160883 0.1045233499 -0.1591801950 0.0418136851 -0.1083421622 0.1558576355 -0.0378978628 0.0981263636 -0.1340578917 0.0390225662 -0.2692512974 0.3738213727 -0.0905746383 0.2148000511 -0.3232523115 0.0737352153 -0.2345404940 0.3421905531 -0.0901329958 0.2168703113 -0.3020885165 0.0747341750 0.0286111363 -0.0266111858 0.0128385938 -0.0087386042 0.0031117665 0.0197513996 -0.0010549307 -0.0121044805 0.0226596611 -0.0034370674 -0.0031625280 -0.0018388777 0.0077940949 -0.0172655879 0.0115188829 0.0037446939 -0.0060688638 0.0026426278 -0.0086042382 0.0005385225 -0.0004538574 0.0013301259 0.0017336482 0.0006623637 -0.0008080285 0.0040620334 0.0016628513 0.0018625094 0.0032975674 -0.0006112122 -0.0002417857 0.0003854994 0.0000918665 -0.0011533156 -0.0007341491 -0.0067200625 0.0079934820 -0.0026705982 0.0014099051 0.0049181039 0.0108489683 0.0044024527 -0.0134186613 0.0047341037 0.0028206353 0.0040608001 -0.0072450692 -0.0023727287 0.0054622815 0.0232566793 -0.0185591136 0.0030760445 -0.0315976148 -0.0125634099 -0.0094745794 0.0067903685 0.0366883237 -0.0021485103 0.0009786895 -0.0004487406 0.0011448985 -0.0009126102 -0.0031643651 -0.0032433376 0.0013684155 0.0005698655 0.0140987639 0.0001456951 0.0101381556 0.0125690440 -0.0098665059 -0.0024258750 0.0036822388 0.0031337545 0.0031336410 -0.0034931133 0.0129804073 -0.0015806723 0.0131245126 -0.0182681451 0.0169964868 -0.0033050034 0.0169654119 -0.0064870174 -0.0021876278 0.0080905673 -0.0043311054 0.0120446378 -0.0250638479 0.0162024721 -0.0077128120 0.0207517849 -0.0045014685 0.0291142437 -0.0480114470 0.0333195816 -0.0059522862 0.0291683486 -0.0150707840 -0.0033369817 0.0043861069 -0.0069453224 0.0257178160 -0.0606139044 0.0350910156 -0.0178639200 0.0359959649 -0.0110377195 -0.0321328068 -0.0406598207 0.0181590265 0.0353362790 0.0501185768 -0.0249367819 -0.0040705481 -0.0055902705 0.0043266351 -0.0329189060 -0.0436004331 0.0226091431 0.0404438540 0.0499161992 -0.0299899491 -0.0651799140 -0.0873628741 0.0391003069 0.0798702231 0.1110522134 -0.0556974546 -0.0018590676 -0.0015442736 0.0043463413 -0.0727200191 -0.0944895016 0.0496977341 0.0862042984 0.1084866952 -0.0623375324 0.0065874818 -0.0016471380 -0.0037324303 -0.0053630093 -0.0080860822 0.0000467508 0.0072658019 0.0006316798 0.0011012992 -0.0049471891 0.0021514282 0.0006107752 -0.0014543225 -0.0065659964 0.0023128924 -0.0047066810 -0.0048036019 -0.0053941805 0.0029311507 -0.0024755180 0.0006411189 -0.0014832455 0.0038282310 -0.0048179191 0.0084379650 -0.0038554009 -0.0015231394 -0.0029972567 0.0066327166 -0.0114436163 -0.0025330444 -0.0011907585 0.0034215080 0.0012034707 0.0034088933 0.0037101380 -0.0053071917 -0.0004098475 0.0089292463 0.0033028152 0.0058563845 0.0091934442 -0.0007510647 0.0108764922 0.0030117764 -0.0005827327 0.0121718873 -0.0038412555 -0.0059029994 0.0020086750 -0.0068347818 -0.0048173161 -0.0069125275 -0.0050603515 -0.0148677660 0.0030844074 -0.0133842816 -0.0057200092 -0.0102851587 -0.0082465455 0.0031111942 0.0034172671 -0.0015349442 -0.0058785217 -0.0069209433 0.0019397071 0.0133194318 0.0024762785 0.0035155959 -0.0068575828 -0.0122324873 0.0089547712 0.0019920021 0.0082516098 -0.0000732653 -0.0094629625 0.0150282355 -0.0179989617 0.0191387801 0.0310708813 0.0141676110 -0.0048102824 0.0091290469 -0.0106243864 -0.0067551921 -0.0058679098 -0.0085012337 -0.0214027369 -0.0711778872 -0.0687148443 -0.0368151370 0.0682560604 -0.0331294851 0.0250657004 -0.0077972573 0.0527506576 0.0381667257 -0.0463519452 0.0757352874 0.0079390079 0.0204591129 -0.1739062583 0.0144098120 0.0153478580 -0.0509924305 -0.0148960824 0.0035943685 0.0434120359 0.0098744449 -0.0341021437 0.0924189275 0.0122022523 0.0300573343 -0.0943191593 -0.0201006512 0.0040621817 -0.0460018942 0.0173665685 -0.0249175864 0.0398068512 0.0414573172 0.0297592223 -0.0543828937 0.0211424576 -0.0323926673 0.1405854684 -0.0585712852 0.0950196165 -0.0393469055 -0.0694513931 -0.0609577411 0.0107940215 -0.0064866429 0.0011239721 -0.0069037520 0.0121601818 0.0115874134 -0.0061676140 -0.0095852198 -0.0222139029 0.0217007175 0.0079003706 0.0160828888 -0.0254576040 -0.0113763345 -0.0027396764 0.0027025117 -0.0049989333 0.0000244483 0.0008622860 -0.0017593483 0.0033399800 -0.0108242649 0.0049162558 -0.0046659293 -0.0055426892 -0.0021130731 0.0021325983 0.0038220430 0.0020646624 0.0018006082 0.0039750174 0.0007085543 -0.0016164985 -0.0075660791 0.0061752535 -0.0143335090 -0.0074610606 -0.0016961775 0.0016284410 0.0062902183 0.0091777803 0.0023481694 0.0091401348 0.0066829959 0.0171815517 -0.0235028720 0.0107877749 -0.0121099213 0.0004757334 0.0150663058 -0.0191025143 0.0012262612 0.0057992444 -0.0150256894 0.0024986302 0.0091865060 -0.0092222618 0.0076724251 -0.0489313893 0.0693041296 -0.0134960641 0.0371244115 -0.0608284597 0.0164734717 -0.0452846539 0.0634163618 -0.0146463262 0.0356496890 -0.0475803151 0.0164762817 -0.1131622681 0.1548733259 -0.0337236400 0.0788289411 -0.1225573688 0.0288629894 -0.0958308457 0.1394073181 -0.0379927204 0.0786146243 -0.1088250658 0.0290997591 0.0225149346 -0.0246044605 0.0112875644 -0.0061647379 0.0039996277 0.0196503778 -0.0107150523 -0.0115249375 0.0267388811 0.0202629943 0.0245988961 0.0072796029 0.0049205085 -0.0125484704 0.0089002462 0.0036360116 -0.0043262341 0.0020699996 -0.0027128092 0.0025262588 -0.0031990622 0.0014638372 0.0029399900 0.0010817932 -0.0006025264 0.0003460050 0.0014520672 0.0027591953 -0.0003327116 -0.0024832460 -0.0010957132 0.0008611852 0.0007202397 0.0000449492 0.0002763164 -0.0047167524 0.0050766272 -0.0018797301 -0.0009054445 0.0012466918 0.0007124871 0.0031775821 -0.0047469026 0.0007101834 -0.0034436109 0.0005875971 -0.0068836103 0.0029639564 0.0046189716 0.0030817412 -0.0039310711 0.0047195125 0.0005693615 -0.0024373712 -0.0053375095 0.0014497416 -0.0003874450 -0.0064468177 0.0020081483 0.0013519413 0.0012823000 -0.0026865177 -0.0049012664 -0.0048775725 0.0009041152 0.0006160210 0.0071813763 -0.0005712435 0.0044831542 0.0077253788 -0.0056423089 -0.0029777014 0.0032662797 0.0005163368 0.0003184393 0.0169690087 -0.0455813644 0.0135301162 -0.0404749993 0.0801429490 -0.0637390783 0.0172672630 -0.0506074722 0.0132704789 0.0221627167 -0.0592971455 0.0247504361 -0.0434234156 0.0791593385 -0.0565284230 0.0070463611 -0.0381571783 0.0026315521 -0.0957192121 0.1998747784 -0.1255146240 0.0250941627 -0.0753111040 0.0284114495 0.0133784889 -0.0207202006 0.0275712722 -0.0999130889 0.2104047174 -0.1288807024 0.0149922926 -0.0552003886 0.0119970486 0.0623691423 0.0830629059 -0.0223235559 -0.0843755004 -0.1150300139 0.0606773364 0.0262727119 0.0368230125 -0.0231157419 0.0705364255 0.0905725878 -0.0432324956 -0.1001105973 -0.1215282006 0.0869624255 0.1163605169 0.1709961895 -0.0574644615 -0.2011415167 -0.2674063835 0.1344496842 0.0097796049 0.0111280597 -0.0220099834 0.1500089229 0.1799263743 -0.0960714947 -0.2167088362 -0.2750600445 0.1736801659 -0.0300172542 0.0033382052 0.0165867911 0.0327214300 0.0244346391 -0.0010488163 -0.0317016554 -0.0003797604 -0.0069753189 0.0194564869 -0.0175002390 -0.0010631139 0.0101285716 0.0539118963 -0.0181088091 0.0255904445 0.0449546460 0.0227065249 -0.0165373226 0.0219915235 0.0061067203 0.0040830515 -0.0295416360 0.0218299728 -0.0544250586 0.0318342138 0.0369617730 0.0046665056 -0.0530497507 0.0596265152 0.0291138900 0.0077076155 -0.0185234110 -0.0036665700 -0.0288891335 -0.0262730540 0.0660819376 -0.0009711998 -0.0466480163 -0.0127184793 -0.0496887332 -0.0572247648 0.0065221688 -0.0474804507 -0.0175234387 0.0016994384 -0.0533257348 0.0142239192 0.0253539698 -0.0112770757 0.0256799725 0.0165241794 0.0294857753 0.0223826734 0.0634794494 -0.0156929191 0.0534973053 0.0189423446 0.0462350172 0.0410653442 -0.0157562557 -0.0142022216 0.0026647773 0.0213756903 0.0293743447 -0.0117241168 -0.0592570534 -0.0103267835 -0.0202310147 0.0257963630 0.0518793596 -0.0421085596 0.0020138392 0.0056865329 0.0003830835 -0.0057030027 0.0096202930 -0.0129320887 0.0137295853 0.0220484872 0.0108298732 -0.0022905250 0.0073832827 -0.0076498033 -0.0057790211 -0.0032684328 -0.0034008077 -0.0201089416 -0.0309018854 -0.0270523152 -0.0169001404 0.0306827146 -0.0162639750 0.0085145971 -0.0002179623 0.0171030098 -0.0125325233 0.0272803654 -0.0313301776 -0.0217244701 -0.0068116364 0.0855915322 -0.0115523709 -0.0073489747 0.0239557780 0.0058931738 0.0015002030 -0.0349673711 -0.0039315249 0.0234238100 -0.0555143308 -0.0121038991 -0.0132918437 0.0578237361 0.0084081057 -0.0000708823 0.0276904906 -0.0080053265 0.0111290426 -0.0281256090 -0.0331280628 -0.0148228786 0.0403210401 0.0015966303 0.0153793458 -0.0988650511 0.0302306151 -0.0429833260 0.0055139616 0.0469884513 0.0454357458 -0.0199244815 0.0073748412 0.0037268076 -0.0057044149 -0.0079122682 -0.0171979049 0.0104879775 -0.0042453100 0.0088095136 -0.0001742045 0.0008883387 0.0082663071 -0.0121092397 0.0175659372 -0.0161796435 0.0111459200 0.0051187907 -0.0034416764 0.0024928890 -0.0097407950 0.0061435053 -0.0077287425 0.0002926505 0.0018751247 -0.0034961000 -0.0045632575 0.0051904340 -0.0029564646 -0.0075895725 0.0053087771 -0.0021494864 -0.0096239838 0.0066928679 -0.0073639203 0.0104658641 -0.0077522854 0.0023262346 -0.0003646819 0.0017549230 -0.0023080494 0.0020733479 0.0003693181 0.0033551509 0.0003874162 0.0059564130 -0.0085906684 0.0036854081 -0.0069045061 0.0021441526 0.0051411170 -0.0101503047 0.0041461288 0.0027598593 -0.0042521037 0.0009305905 0.0021762303 -0.0035386341 0.0010148271 -0.0039683372 0.0054806595 -0.0011699959 0.0031057462 -0.0045349776 0.0005455322 -0.0039489931 0.0048940192 -0.0016761335 0.0012466491 -0.0026729983 0.0009750813 -0.0104142671 0.0143112192 -0.0036436294 0.0080795324 -0.0105090344 0.0025674442 -0.0070234979 0.0096255401 -0.0034017475 0.0027663795 -0.0049920634 0.0013057082 0.0052511952 -0.0073875894 0.0019180282 0.0015305651 -0.0026724422 0.0080615181 -0.0047344742 -0.0037884687 0.0103641972 -0.0231075736 -0.0161376488 -0.0037904044 0.0020245594 -0.0066016131 0.0053146774 0.0018552201 -0.0034646476 0.0015359457 -0.0010233052 0.0001825881 -0.0002376322 0.0002654949 0.0012300091 0.0003157073 0.0000152991 0.0004799602 -0.0008011667 0.0010052838 0.0007146520 0.0004736327 -0.0004415768 0.0004157593 0.0004897790 -0.0004278216 -0.0007704596 -0.0036496934 0.0037758732 -0.0000609752 -0.0018619625 -0.0010682331 -0.0020089416 -0.0009101109 0.0000105641 0.0006552137 -0.0032377078 -0.0005415675 -0.0001481113 0.0007501132 0.0001888709 0.0008725802 -0.0010482757 0.0008171998 -0.0029078695 -0.0007106341 0.0025219251 0.0003582730 0.0042463447 -0.0016563618 0.0004876833 0.0014510281 -0.0003177478 -0.0005072173 0.0002220465 -0.0002023610 -0.0004021089 0.0000245801 0.0046902942 0.0003742464 -0.0006592576 0.0067360517 -0.0001380295 -0.0035854505 0.0027477470 0.0012831225 0.0017466332 0.0053547011 0.0115993006 0.0081730747 -0.0593057223 0.1493786996 -0.0671547595 0.0829386753 -0.1798168708 0.0975992788 -0.0011331584 0.0021497722 -0.0052578352 -0.0661593024 0.1599657928 -0.0891570729 0.0949990996 -0.1660039144 0.1063243988 -0.1355212196 0.3353977082 -0.1587989636 0.1587819805 -0.3549509376 0.1861784483 -0.0108890449 -0.0013460395 -0.0081543523 -0.1596606884 0.3634816959 -0.2041507139 0.1870645699 -0.3485333774 0.2109112021 -0.0077852452 -0.0014482858 -0.0117776485 0.0117774619 0.0235022363 -0.0133565107 -0.0183030504 -0.0258646354 0.0139139364 -0.0115548254 -0.0036231930 -0.0043777608 0.0153567714 0.0269979096 -0.0314330676 0.0040380658 0.0012939320 -0.0181525206 0.0405093593 0.0615874674 -0.0323053005 -0.0014105456 -0.0111353761 0.0150919933 -0.0155720432 0.0091586348 -0.0032805218 0.0460295495 0.0685206356 -0.0554291473 0.0051672661 -0.0089045017 -0.0037879751 -0.0269015058 -0.0004091331 0.0032567341 0.0255255690 -0.0058265257 0.0055603304 -0.0026213469 0.0094891998 0.0028609445 -0.0086681103 -0.0295005522 0.0087154409 -0.0170294601 -0.0245108096 -0.0142881677 0.0092275327 -0.0135399309 0.0067995280 -0.0093119474 0.0184774954 -0.0121152299 0.0359216719 -0.0200432489 0.0003652049 -0.0094250150 0.0330632674 -0.0350371544 -0.0153441978 -0.0026072808 0.0196064669 -0.0050363554 0.0179171351 0.0143953418 -0.0315568296 0.0014966501 0.0435915634 -0.0009554496 0.0283962199 0.0292561324 -0.0038234428 0.0226047221 0.0188815304 0.0005865599 0.0259876314 -0.0082703935 -0.0041730335 0.0049888369 -0.0109781163 0.0019939046 -0.0167405059 -0.0096373569 -0.0192367922 0.0065543708 -0.0306883200 0.0049760711 -0.0255006712 -0.0257702870 0.0133867092 0.0038594707 -0.0034963497 -0.0087725937 -0.0155439091 0.0149862769 0.0387961408 0.0016946029 0.0045100244 -0.0159501214 -0.0229080438 0.0358973011 0.0018428058 0.0022776487 0.0005897314 -0.0027125905 0.0047082373 -0.0071376157 0.0089407332 0.0107135108 0.0053961348 -0.0002745859 0.0027982948 -0.0026096842 -0.0040072896 -0.0008260977 -0.0005625898 -0.0149589313 -0.0061390212 -0.0034299833 -0.0034589955 0.0067213693 -0.0051676653 -0.0002193215 0.0035495739 -0.0015263862 0.1429992770 0.0630313270 -0.0433757259 -0.0768425286 0.0063880087 -0.0701877342 0.0255918991 -0.0192767618 -0.0596807006 -0.0042465477 0.0590649442 -0.0086641281 0.0424479280 0.0648296649 0.0149288855 -0.0240481484 0.0579836110 0.0027194509 0.0234979738 0.0459404003 -0.0376889912 -0.0145412929 -0.0264235613 -0.0374199003 -0.0752807108 0.0719863832 -0.0312401453 0.0704937190 -0.0335003615 -0.0313667625 -0.0147044427 0.0171641840 0.0154209730 -0.0367225291 -0.0203096733 0.0065624050 -0.0156732676 -0.0171806759 -0.0073256006 0.0409725571 0.0091005856 0.0031198417 -0.0018076737 -0.0222826185 -0.0137459376 -0.0128054545 -0.0040559752 -0.0092193244 -0.0017767578 0.0120325228 0.0036159840 -0.0037130816 0.0111155797 0.0042197253 -0.0154826948 0.0091070636 -0.0101521939 0.0097433146 -0.0007399384 0.0101062664 -0.0031530094 0.0028839885 0.0026176289 0.0013456634 -0.0049511709 0.0066963024 -0.0035960331 0.0090639213 0.0006378944 0.0255877506 -0.0163127259 0.0190642527 0.0066879492 -0.0047841488 0.0017463625 0.0289435439 -0.0218870610 0.0233175224 -0.0127926154 0.0011217223 -0.0102339419 -0.0034818583 -0.0194863139 0.0105825262 -0.0064499701 -0.0210862961 0.0218310988 0.0122097713 -0.0073670211 0.0030219970 0.0030055252 -0.0098200358 -0.0021069777 0.0037631185 0.0021858518 -0.0043963316 0.0020340848 0.0091855663 -0.0021429674 -0.0017941998 0.0039450034 -0.0007363470 -0.0051481745 0.0038889188 -0.0065147465 0.0031521130 0.0061753779 -0.0100343771 -0.0055701022 0.0213006146 -0.0031168188 -0.0078475253 0.0089303849 0.0038725430 -0.0124921378 0.0105586482 -0.0111874965 0.0072494357 -0.0205176963 0.0004257367 0.0071002937 0.0004080097 0.0051849180 0.0051599559 -0.0032190695 0.0060932728 -0.1055067010 0.0888783073 -0.0419742915 0.0035580499 -0.0140979555 0.0127767827 0.0046029217 -0.0074938814 0.0042837491 -0.0018948617 0.0011676712 0.0002138665 0.0007632373 0.0030488053 0.0007461279 -0.0030176059 -0.0006446784 -0.0025854872 0.0029868897 0.0019096990 0.0016945914 -0.0011436009 0.0010425077 0.0010726453 0.0004573621 -0.0022423803 -0.0092626831 0.0101839715 0.0001841746 -0.0061385330 -0.0007160616 0.0009776763 -0.0006809744 -0.0088102166 0.0001908280 -0.0110214366 -0.0009702659 -0.0121226335 -0.0005785560 0.0023363012 -0.0013371775 0.0040265744 0.0006023171 0.0035896476 0.0021952130 0.0066362951 0.0005991904 0.0006097637 -0.0065310939 0.0016824485 0.0039368610 -0.0001231793 -0.0029579320 -0.0012555309 -0.0013307091 -0.0014046294 -0.0003689900 0.0125151110 0.0010697993 -0.0049305566 0.0172427880 0.0006396882 -0.0101884941 0.0077964136 0.0033901855 0.0029403973 0.1959843788 0.0770889066 -0.0716802773 0.1905270431 0.0470295101 -0.0109535795 0.1589545371 0.0652310877 -0.0019836239 0.0211246742 -0.0007778129 -0.0032009986 0.1620855024 0.0006644770 -0.0775787503 0.1626328959 0.0583215824 -0.1028737839 0.1611822119 0.0092032641 -0.0122282724 0.2184974435 0.0746675520 -0.0722640392 -0.1369730581 -0.0360207668 0.0390926111 0.2680003135 0.0190500956 -0.0294917429 0.1252749601 0.0687983685 -0.0814131575 -0.1058732090 0.0585288110 0.0002780045 -0.0875770331 0.0587219094 0.0117608695 -0.0024167479 0.0137459316 -0.0053357104 -0.1018324121 0.0312816670 -0.0449621243 -0.1041986839 0.0557518352 -0.0533373870 -0.0949000873 0.0226169029 -0.0027203596 -0.1398810628 0.0616364366 -0.0247543463 0.0856305947 -0.0438336649 0.0160565191 -0.1670439105 0.0565060168 -0.0090233027 -0.0933414090 0.0420998626 -0.0344548724 -0.2118246519 -0.0617244523 0.0232280356 -0.1967211013 -0.0388400516 0.0837763411 0.1182950282 -0.0768661258 0.0063574022 0.1193772645 -0.0636074759 0.0432124224 0.0102599514 -0.0573188100 -0.0048044798 -0.0651862292 -0.0341854477 0.0568470797 -0.0197811425 -0.0735258876 -0.0083324575 -0.0351301405 -0.0125516224 0.0271928943 -0.0353994021 -0.0696411407 -0.0319246667 0.0158486803 0.0546864474 -0.0003749925 -0.1207589098 -0.0079657405 0.0649096497 -0.1201298108 0.0052614054 0.0695851306 -0.1484679022 -0.0049206632 0.0441913266 -0.1400010573 0.0471592405 0.0650462926 0.0474002635 -0.0589454709 0.0212919086 -0.0214412623 -0.0618291479 -0.0036768589 0.0788344178 -0.0448606935 0.0651418241 0.0828177992 -0.0157133539 0.0509011138 0.0973817982 -0.0481782038 0.0841325469 0.1064783725 0.0213315756 0.0640029555 -0.0272807272 -0.0580656277 0.0038873949 0.0234292170 -0.0070880294 -0.0026922339 -0.0471225512 -0.0560120678 -0.0009798554 0.0093582186 0.0582713397 -0.0387825110 0.0040764725 0.0058651526 0.0023818489 -0.0039820834 0.0082587832 -0.0151759685 0.0169586080 0.0243246299 0.0141960575 0.0012221772 0.0096918395 -0.0060470700 -0.0124513841 0.0022162080 -0.0018646512 -0.0448939597 0.0067704993 0.0091901666 -0.0014217504 0.0033672614 -0.0085693442 -0.0107980535 0.0160368854 -0.0251331228 -0.0585600629 -0.0733573554 0.0610968749 -0.0062474848 -0.0446909595 -0.0364388538 -0.0381466739 -0.0372237547 0.0070743756 -0.0147391826 -0.0064191136 -0.0571991815 0.0351265865 -0.0653982373 0.0327392621 0.0227581282 0.0925939433 -0.0068823444 -0.0014847761 0.0324079127 0.0141817229 -0.0210105988 0.0366736338 -0.0275922135 -0.0757587900 0.1349944836 -0.0547425097 0.0740065663 0.0282419449 -0.0005957447 0.0652563145 -0.0105843875 -0.0105193790 0.1214991980 0.0300606611 0.0399514177 0.0839464899 -0.0314518583 0.0093176482 -0.0977369327 -0.0810475085 -0.0885125778 -0.1394070139 0.1146634138 0.0446827121 -0.0323920711 0.0216212318 0.0007981765 -0.0249500132 0.0068082429 -0.0054415290 -0.0146049560 -0.0011898500 0.0001150924 0.0033136848 0.0048996389 -0.0079854932 0.0043353046 -0.0136533286 0.0038842254 -0.0077021319 -0.0045998123 0.0035908692 0.0173165280 -0.0065611807 0.0022877445 0.0074313809 0.0081232870 -0.0083578696 0.0058703910 -0.0312024616 -0.0003915908 -0.0150986217 0.0009506780 0.0088474238 0.0271044499 -0.0012188151 0.0107650707 -0.0196108074 -0.0130590289 0.0026207747 -0.0165060707 -0.0122418246 0.0058794648 -0.0251113203 -0.0069875587 0.0202608041 0.0072284246 0.0065859055 0.0003010046 -0.0029578355 -0.0038901935 0.0002268358 0.0090069990 0.0017292016 -0.0018105597 0.0076532094 0.0124102967 -0.0034496522 -0.0000090466 -0.0028073249 0.0025918306 -0.0045951985 0.0011561260 -0.0028762454 0.0142271008 -0.0013509331 -0.0070951794 0.0179231679 0.0131804635 0.0046636093 -0.0000636639 -0.0077246166 0.0121896282 -0.0101014236 0.0018892626 -0.0086917618 -0.0034804486 -0.0066010045 0.0010737138 0.0083383007 0.0127395269 -0.0171164782 -0.0335066870 0.0411348964 -0.0117316439 -0.1437787744 0.1428493841 -0.0638248764 -0.0002668124 -0.0051996993 0.0044172410 0.0031579299 -0.0031137156 0.0019823284 0.0013148729 -0.0003747786 0.0018208848 0.0006228503 0.0014179728 0.0003304421 -0.0052392668 0.0017952216 -0.0015854060 0.0015687583 0.0043729437 0.0003718005 -0.0011916069 0.0013490280 0.0011238723 0.0010903832 -0.0018490670 -0.0045967454 0.0057329182 -0.0003669189 -0.0045982406 0.0056585322 0.0117370772 0.0056860346 -0.0207568004 0.0030320036 -0.0064728855 0.0031181488 -0.0189093898 -0.0079834266 0.0000602292 -0.0001571440 0.0011614322 -0.0023773875 -0.0004726458 -0.0011602938 0.0015653865 0.0039254563 0.0055417899 -0.0023304411 0.0014815366 0.0020015888 -0.0010685326 0.0005619175 0.0007432135 -0.0014218683 0.0008451669 0.0008456105 0.0063258063 -0.0000902167 -0.0047688141 0.0084635004 0.0009603375 -0.0059695795 0.0045253604 0.0011202409 0.0001886873 -0.1100742910 -0.0728484123 0.0414070492 -0.1167235931 -0.0524580472 0.0015357459 -0.1162956732 -0.0168209417 -0.0175633651 -0.0110106406 -0.0119697200 0.0082859603 -0.0935650659 -0.0141807566 0.0456811687 -0.1097615282 -0.0240429548 0.0353069581 -0.1036295474 -0.0454992356 0.0052379587 -0.1694510286 0.0089577023 0.0123311538 0.0861564112 0.0189555625 -0.0120434820 -0.1487855877 -0.0274085923 0.0215205388 -0.0987718151 -0.0019918278 0.0037533275 -0.1599077779 0.0922841408 0.0019251445 -0.1390089245 0.0851026813 0.0219837189 -0.0002077075 0.0331574318 -0.0125862698 -0.1515382624 0.0494161796 -0.0620712264 -0.1577402665 0.0813346235 -0.0704698033 -0.1504669928 0.0399832644 0.0010005474 -0.2272085118 0.0752777950 -0.0252190732 0.1271635499 -0.0609272217 0.0188567690 -0.2517990059 0.0766440463 -0.0057411523 -0.1525863037 0.0507016037 -0.0381595037 0.1147056840 0.0375917405 -0.0067555898 0.1353339520 0.0296269304 -0.0518221995 0.1684307813 -0.1129924147 0.0070476164 0.1791123988 -0.0981916688 0.0645491134 -0.0249017623 0.0011781305 0.0001507265 -0.0009092305 0.0041350258 -0.0553197391 0.0368661393 0.0225927044 0.0490706467 -0.0047369975 0.0227780738 -0.0436850993 0.0999053272 0.0085624200 0.1124176303 -0.0356530238 0.0021552405 -0.0579406697 0.0617444451 -0.0056930162 0.0239290637 0.0435029107 0.0110901388 -0.0303196622 0.0997488466 -0.0102620265 0.1064981667 0.0591112301 0.0029545557 -0.0086474050 0.0260562375 -0.0417585453 0.0537525935 -0.0298891089 -0.0306541682 0.0003927888 0.1026632321 -0.0315548544 0.0216408507 0.0897636020 -0.0261723160 0.0601514411 0.1442075907 -0.0385054124 -0.0267513250 0.1129263521 -0.0058176674 0.0526041860 0.0130124715 -0.0643405862 -0.0326996154 0.0181757586 -0.0189678440 0.0394199022 0.0509946933 -0.0668835609 -0.0868526040 -0.0094197996 0.0470175604 0.0285255903 0.0004204600 0.0015494678 0.0005245350 -0.0018735921 0.0008724090 -0.0070243807 0.0046337091 0.0078302758 0.0045816037 0.0010739105 0.0044265426 -0.0023440805 -0.0046367898 -0.0017734022 0.0048429089 -0.0088162054 -0.0264238237 -0.0185383100 -0.0131130418 0.0219314794 -0.0047332630 0.0085290899 -0.0009141440 0.0301924672 0.0206411764 -0.0200180936 0.0058126796 -0.0025308216 -0.0248598192 -0.0347868522 -0.0129514591 -0.0242344340 -0.0137635860 0.0066674069 -0.0009844568 -0.0612502940 0.0658605369 -0.0365392740 -0.0037015838 0.0271495674 0.0374225364 0.0770991636 0.0035685187 -0.0128028313 -0.0033472058 0.0315811011 0.0270787846 0.0397023818 0.0576021645 0.0270777048 0.0315620901 0.0821579859 0.0208449526 0.0404216329 0.0243600656 0.0894905609 0.0767971258 0.1240982542 0.0042917344 0.0187684643 0.0626625793 -0.0686730813 0.0135272049 -0.0085471389 -0.0304889686 -0.1202653366 -0.1159093844 0.0806432217 0.0004958905 -0.1592473932 0.0225863402 -0.0416203325 -0.0653555029 0.1081691905 -0.0136739773 -0.0538139534 0.0603026056 0.0188554647 -0.0778602137 0.0510945516 -0.0535941452 0.0493679622 -0.0286069962 0.0819172882 -0.0278031195 -0.0142468082 0.0165571053 0.0448168837 -0.0567236219 0.0332385872 -0.0005646755 0.0691551784 0.0043971999 0.1288534618 -0.1292194011 0.1196782316 0.0022649124 -0.0375395940 0.0131671754 0.1686820793 -0.1114552391 0.1111294523 -0.1340615236 -0.0416365167 -0.0189090357 -0.0818927310 -0.1214900577 0.0794622067 -0.1250310187 -0.1064252027 0.1754529661 0.0811565975 -0.0140040352 0.0189635418 0.0039033886 -0.0576193244 -0.0215299571 0.0349568807 0.0266637187 -0.0361122553 0.0526174375 0.0562788076 -0.0134064765 -0.0106374445 0.0255222435 -0.0013447577 -0.0289468933 0.0055103573 -0.0454957911 0.0308430795 0.0660914782 -0.0951616652 0.0413315799 0.1068417014 0.0004042049 -0.0608970331 0.0611689516 0.0480262412 -0.0737258004 0.0347083607 -0.0806943662 0.0099284575 -0.1046834492 -0.0099579522 0.0691991108 0.0281978009 -0.0561847031 0.0102322396 0.0939730661 -0.0599413841 0.0721121143 -0.0170496838 -0.0178567886 -0.0204988176 -0.0640614694 0.0505627968 0.0276288507 -0.0418988350 0.0390924084 -0.0200807684 -0.0266899192 0.0746586141 0.0129143684 0.0561634686 0.0011302442 0.0031782434 0.0154302718 -0.0303467662 0.0277990308 0.0061412909 0.0120238861 -0.0160232624 0.0156136925 0.0157429936 0.0060824243 -0.0379208149 -0.0845604143 0.1041920094 0.0048385514 -0.0616202472 -0.0116720482 -0.0156959617 -0.0313660768 0.0211704914 0.0164250804 -0.0621770221 -0.0085556923 0.0179575309 -0.0059671541 0.0026184443 -0.0284293680 0.0098540772 -0.0074568837 -0.0182815928 0.0034960771 0.0877989100 -0.0119857148 0.0404733657 -0.0787427362 0.0190864417 0.0667211336 -0.0135655850 -0.0289387094 0.0108312950 0.0078010162 -0.0336133805 -0.0121167142 0.1386173593 0.0144747020 -0.0664502007 0.1717065626 0.0237522636 -0.0991978933 0.0733474513 0.0460462149 0.0369003516 0.0232301585 -0.0005628880 -0.0087800484 0.0222228674 -0.0011454686 -0.0068048823 0.0171638596 0.0090677612 -0.0051569056 0.0060670311 -0.0012891308 -0.0001423000 0.0238734457 -0.0004571727 -0.0117490491 0.0231351842 0.0062653515 -0.0175569622 0.0189239528 -0.0093107849 -0.0055905059 0.0240224378 0.0091929367 -0.0119141458 -0.0151607635 -0.0035353033 0.0071032471 0.0376518469 0.0043615910 -0.0063478760 0.0222896636 0.0087202253 -0.0191919003 0.0426048553 -0.0623820944 -0.0054356392 0.0443406258 -0.0447780719 0.0063856662 0.0338169877 0.0350158698 -0.0086181285 0.0327297756 -0.0260694439 0.0293422444 0.0330774209 -0.0488023250 0.0111218758 0.0158436440 -0.1074365775 0.0120765132 0.0548759432 -0.0869519484 0.0531937256 -0.0278147657 0.0374736513 -0.0113383443 0.0175812083 -0.0717245804 0.0410084163 -0.0161216265 -0.0824394355 0.0176652993 -0.0297902703 -0.0085168059 0.0028070659 -0.0197797112 -0.0022526460 0.0093874049 -0.0593418730 0.0260723100 -0.0003278220 -0.0632166285 0.0223497205 -0.0207510551 -0.0311540658 0.0123453503 0.0092781891 -0.0178480759 0.0093263962 -0.0378640267 -0.0304875765 0.0065243357 0.0720270732 -0.0841770622 0.0355938701 0.0065555706 0.0026694639 0.0006747788 0.1245717685 -0.0987745275 0.0408009079 -0.0214541594 0.0056864763 0.0360768711 0.0508803593 -0.0381987469 0.0257981348 0.0279707009 0.0322123465 0.0310230025 0.1118773908 -0.0167300671 -0.0092726718 0.0435362584 -0.0150752994 -0.0329128591 -0.0132260124 -0.0328843205 -0.0320194672 0.0076132833 -0.0217464642 -0.0340609791 -0.0357705997 -0.0643395375 0.0186750346 -0.0222599987 0.0023935026 -0.0355100068 -0.0304965585 -0.0535034625 0.0541649150 0.0056614811 -0.0610032891 0.0085067219 -0.0447369753 -0.0721226732 0.0185870972 -0.0445824017 -0.0842260164 0.0096229303 -0.0792727182 -0.0685195960 0.0172821892 -0.0523394766 0.0164976357 0.0086538997 -0.0130613385 -0.0197048437 -0.0009737477 -0.1314640095 0.0932287646 0.0827515370 0.0214318206 0.0422691554 0.0440080634 -0.0217936808 -0.1004208823 -0.0011564698 0.0087257783 -0.2383535997 0.0146253402 0.0522609522 -0.0638158124 0.0047802771 -0.0160484773 -0.0771102994 0.0703835053 -0.0808950664 0.0455052169 -0.0521316223 -0.0001352508 0.0431975195 -0.0527982930 -0.0522265049 0.0033202587 -0.0458020784 -0.0377784332 0.0016101663 0.0042237431 -0.0470247958 0.0517994693 -0.0591560278 -0.0466183776 0.0445199912 0.0316553703 0.0384490289 -0.0135050720 -0.0032253390 0.0485287196 0.0172699809 0.0311769655 0.0330875220 0.0473057182 0.0285438521 0.0073082467 0.0537983248 0.0264045911 0.0354026460 0.0707615612 0.0166092240 0.0108325747 0.0983707140 -0.0358949852 -0.0320182830 0.0844592906 -0.0139238441 0.0076816744 -0.0983771440 -0.0678198532 -0.0900567847 -0.1205724267 0.0923641044 0.0829672400 0.1090791056 -0.0088815237 0.0464340025 0.0290691683 -0.1102424207 0.0195567742 0.0285373624 -0.0629966492 -0.0122957525 0.0766816867 -0.0355829318 0.0242511080 -0.0355776387 0.0031143833 -0.0794956107 0.0070899470 0.0121897788 -0.0076898649 -0.0154914603 0.0490494947 -0.0264375444 0.0082317229 -0.0461303717 -0.0301826081 -0.1013407001 0.0522554595 -0.1216507114 -0.0295256619 0.0400107235 0.0086656662 -0.0930215695 0.1009974471 -0.0701256106 0.1054342381 0.0149264252 0.0138025683 0.0617973494 0.0920574894 -0.0708839927 0.0890711531 0.0901476235 -0.1466003067 -0.0632256547 0.0115459951 -0.0173345220 -0.0041249630 0.0446997192 0.0265926431 -0.0216299210 -0.0220877048 0.0352785819 -0.0433263274 -0.0357263010 0.0067893046 0.0057316769 -0.0275435727 0.0044595167 0.0185434474 0.0009657789 0.0429388359 -0.0155684320 -0.0597565920 0.0869086820 -0.0237584084 -0.0730418408 0.0027616539 0.0481032311 -0.0595333810 -0.0326438037 0.0483207488 -0.0198282836 0.0659973591 -0.0050064897 0.0826742789 0.0173957353 -0.0524763121 -0.0035533365 0.0498696826 -0.0904451112 -0.0282158926 0.0715470516 0.0582113072 0.0020608294 -0.0115423978 0.0330127232 0.0584058742 -0.0402534501 -0.0232525120 0.0398310830 -0.0428743031 0.0287946736 0.0370533350 -0.0999014097 -0.0159016248 -0.0651091795 -0.0014607046 -0.0011737119 -0.0182271012 0.0364980296 -0.0331932071 -0.0064107821 -0.0136089843 0.0165730106 -0.0169879463 -0.0165044025 -0.0055502690 0.0440901529 0.0894635552 -0.1122364582 -0.0076070112 0.0641468826 0.0142239699 0.0039604495 0.0424716575 -0.0137599845 -0.0198414938 0.0646694043 0.0111509684 -0.0185077761 0.0093606585 -0.0057907356 0.0326934790 -0.0158958766 0.0057693787 0.0175188052 -0.0050615893 -0.1081655082 0.0163028030 -0.0420930685 0.0926860550 -0.0211763447 -0.0781184546 0.0130456099 0.0369797408 -0.0094004947 -0.0113367291 0.0422570037 0.0171290397 -0.1537817919 -0.0184050982 0.0742115927 -0.1865572891 -0.0300231459 0.1056301968 -0.0770923164 -0.0549117964 -0.0447415293 0.0652417114 -0.0218333868 0.0161838132 0.0466353532 0.0294307287 -0.0107235925 0.0358511595 0.0332904091 -0.0261935416 0.0232668634 -0.0423755359 0.0074404572 0.0260116017 0.0126102217 -0.0384449045 0.0332837398 0.0252377318 -0.0227394055 0.0327957321 0.0739484488 -0.0308610382 0.0372049026 0.0826806489 -0.0744797365 -0.0243653945 -0.0247607030 0.0243493700 0.0169589898 0.0602910021 -0.0582753934 -0.0009476314 0.0670489054 -0.0348325252 0.0281504733 -0.0402943889 0.0058804386 0.0283593065 -0.0301351428 0.0091185614 0.0317024586 0.0333745003 -0.0100912085 0.0224635782 -0.0232840389 0.0273751263 0.0259302956 -0.0327277618 0.0159318023 0.0002313937 -0.0796848498 0.0236186954 0.0229595048 -0.0710322988 0.0449632044 -0.0178556481 0.0275864065 -0.0144061974 0.0040204323 -0.0706239591 0.0414059134 -0.0111328677 -0.0645701956 0.0271049324 -0.0655354839 -0.0081387305 0.0147017527 -0.0313864086 0.0035229123 0.0224232550 -0.0482132171 0.0207840740 -0.0035265209 -0.0374813343 0.0081911360 -0.0143149159 -0.0402718253 0.0304760145 -0.0140506602 -0.0223565814 0.0280344289 -0.0312557713 -0.0450154674 0.0075552730 0.0881229113 -0.1019779583 0.0272328504 0.0229879293 -0.0166302059 0.0039009751 0.1757046760 -0.1054258793 0.0317238095 0.0133226924 0.0069987719 0.0450689834 0.0701174381 -0.0684129229 0.0191872620 0.0262432284 0.0566226248 0.0353428164 0.1383218549 -0.0521707637 -0.0255509415 0.0261137065 -0.0350106613 -0.0171367537 0.0376330916 -0.0366099477 -0.0158190708 0.0138916659 0.0014181122 -0.0336525460 -0.0687680393 -0.0541075587 0.0056154512 -0.0224863032 0.0551031548 -0.0387460065 -0.1312163031 -0.0274586788 0.0323607648 -0.0301821537 -0.0263348023 0.0057526706 -0.0824394737 -0.0874286385 0.0085084633 -0.0025923296 0.0023319763 0.0025402920 -0.1715240069 -0.0981281390 0.0066493389 0.0173613066 -0.0125682695 0.0004991455 0.0252933186 0.0198825295 0.0159647318 0.1448440943 -0.0894276874 -0.0614269168 0.0028625922 -0.0503805168 -0.0357374296 0.0188869274 0.1045317312 0.0104743643 -0.0071027439 0.2230167157 -0.0356583929 -0.0762846947 0.0708944891 0.0321403075 -0.0010764218 0.0926240856 -0.0580631555 0.1024684912 -0.0524245007 0.0421561340 -0.1088208569 -0.0171203932 0.0025188267 0.0344182803 -0.0065457758 0.0000408241 0.0379267188 0.0731979652 0.0005001161 0.0728128398 0.0266666588 -0.0015128035 -0.0560321827 0.0506311780 0.0385439471 -0.0069966283 0.0307300230 0.0017012520 -0.0041277203 0.0067556178 0.0141085206 0.0306594192 0.0500064245 0.0573017239 -0.0652195913 0.0421283879 0.0042736259 0.1136268398 0.0266447806 0.0362015279 0.0680108149 -0.0210394259 -0.0810329224 -0.0297641209 0.0170728759 -0.0306703620 0.0180948921 0.0038444455 -0.0001364978 -0.0449018326 -0.0324936365 0.0013240885 0.0236670072 0.0017896931 -0.0125987939 0.0036241068 0.0063264805 -0.0199738866 0.0135934076 -0.0009903092 -0.0064796923 0.0045430488 -0.0007176158 0.0042261087 -0.0126404969 0.0016942988 -0.0039788995 -0.0074269470 -0.0090111638 0.0037731913 0.0006840532 0.0022562129 0.0037209096 -0.0003288682 -0.0030611637 0.0089301586 -0.0144228127 0.0090913165 -0.0240103783 -0.0073112817 -0.0091891729 0.0036098028 0.0053017126 0.0189657558 0.0029142829 0.0118803837 0.0024374520 -0.0078253949 -0.0037682285 0.0033493405 0.0004988809 -0.0059105862 0.0004567596 0.0071352282 -0.0101001110 0.0004239506 -0.0046303358 -0.0008888182 0.0008204991 0.0004737903 0.0047588457 0.0009467496 -0.0013369725 0.0036755266 -0.0029415364 -0.0007805307 0.0003156361 -0.0018419046 -0.0013403093 0.0010563780 -0.0003625417 0.0023797608 0.0038875318 -0.0023214364 0.0006916286 0.0062481898 -0.0043794330 0.0033665986 -0.0000049780 -0.0019411305 0.0005448354 -0.0021087450 -0.0038123163 0.0065858971 0.0026777190 0.0017713864 0.0028207494 0.0042036378 0.0032342675 0.0050483070 0.0106656787 -0.0173509923 -0.0011129841 0.0203143752 0.0447795778 0.0739283134 -0.0242608287 0.0143667711 0.0051481629 0.0016254999 -0.0019610106 0.0051040681 -0.0094748549 0.0088871403 0.0137662959 -0.0338076223 -0.0043078892 -0.0172721289 -0.0000903874 -0.0005305431 -0.0068786286 0.0102116780 -0.0086360538 -0.0022988596 -0.0032967183 0.0040485709 -0.0045200330 -0.0040085827 -0.0013591688 0.0114733350 0.0183816995 -0.0246651753 -0.0028266389 0.0133953065 0.0031747332 -0.0038507697 0.0130242134 -0.0024421084 -0.0072151642 0.0110089040 0.0026161555 -0.0103698220 0.0051083335 0.0001423774 0.0091633958 -0.0031294024 0.0027250780 0.0080804811 0.0002782351 -0.0308816000 0.0042681509 -0.0145451647 0.0237116499 -0.0052919539 -0.0212560473 0.0038140291 0.0095163600 -0.0037981714 -0.0050550477 0.0123346799 0.0055249080 -0.0356734727 -0.0052603670 0.0188273727 -0.0411331693 -0.0093584936 0.0225756633 -0.0162149496 -0.0143075314 -0.0116264738 -0.0737012537 0.1356004225 -0.0421820891 -0.0186877873 0.0139580146 0.0485353665 0.0246492066 -0.0756246015 0.0851354350 -0.0336211160 0.0881856122 -0.0235564022 0.0149712953 -0.0290086301 0.0672626156 0.0100268595 -0.0074990782 0.0623096945 0.0166414167 -0.0680415726 0.0902162461 0.0733282838 -0.2053694631 0.1590995073 -0.0143391433 0.0328912948 -0.0703865020 0.0564497006 -0.1459458802 0.1270430359 0.0680709788 -0.1227996917 0.1281963252 -0.0135042883 0.0005855096 0.0251755512 -0.0282122693 -0.0175842590 0.0307800168 0.0384577217 0.0611345202 -0.0220225931 -0.0257745584 -0.0146835920 0.0246709879 -0.0213204932 -0.0019355146 0.0243636011 -0.0591011934 -0.0602404940 0.0538887510 -0.0869299454 -0.0909476838 0.0646198380 0.0211171829 0.0149751229 -0.0299443979 -0.0810625680 -0.0868257099 0.0625182394 -0.0729743340 -0.0706821730 0.0632332987 0.0927504542 0.0022721846 -0.0454667938 -0.0639832305 -0.0365121628 -0.0128974147 -0.0267333613 -0.0024902652 -0.0131411458 0.0306178670 -0.0338791903 0.0011488010 0.0528295740 -0.0171086555 0.1186653134 0.0906099603 -0.0222458647 0.1217933671 -0.0702052144 0.0215803625 -0.1265221650 0.0450982322 0.0024496528 0.0673496874 -0.2097697346 0.0488265363 -0.4043045337 0.0218735717 -0.0039876240 0.0427968038 -0.0615521737 0.0090892343 -0.1341793375 0.0463430690 0.0006694964 0.0319427098 -0.2311612862 0.0378103615 -0.3634646124 0.0151534367 -0.0013633071 -0.0249179236 0.0192833539 -0.0403338335 -0.0125011230 -0.0500093524 -0.0424012166 0.0184237529 0.0010363276 -0.0526589429 -0.0052567198 -0.0449543816 0.0019789579 0.0149738353 0.0201371513 -0.0537473795 -0.0081330682 -0.0330690705 0.0541903405 0.0631632781 -0.0775750667 -0.0104623723 -0.0311132737 -0.0581203347 0.0027560422 -0.0698339817 -0.0914597527 -0.0101203210 -0.0652400836 -0.0377538167 0.0210851893 -0.1274186152 0.0020984716 0.0067112259 0.0129332535 0.0041980675 0.0135377338 0.0319599458 -0.0095392363 0.0062936245 0.0184667277 -0.0126278574 0.0001707233 0.0014988586 0.0186906097 0.0088673143 -0.0053491657 0.0161176041 0.0024851747 -0.0109988741 0.0253864349 0.0131985412 -0.0116456392 0.0148451198 0.0037550558 -0.0025447685 -0.0139888451 0.0353875633 -0.0426146452 0.0108115046 0.0110701999 0.1010158247 0.0183463380 0.0126943949 0.0121500302 -0.0666672481 0.0121509165 -0.0006314118 -0.0740697826 0.0405978464 -0.0002010985 0.0112433847 0.0101991775 -0.0899850511 -0.0776559119 0.0236789899 0.1052035365 0.0002011478 0.0090869148 0.0319592470 0.0565167565 0.0300040945 -0.1104838413 -0.0058547924 0.0086506370 0.0468876060 0.0542379449 -0.1320997845 -0.0843511749 -0.0685422737 0.0244138431 0.0656462540 -0.0016636333 0.0377139102 0.0022000665 -0.0515024623 -0.0340067073 0.0702854587 0.0379630670 -0.0092886337 0.0203606972 -0.0181956598 -0.0211020946 0.0161411734 0.0001017870 0.0007293604 0.0005031404 -0.0070671348 0.0001985133 0.0009398608 -0.0096891046 0.0081838376 -0.0086077119 0.0032557950 -0.0076309156 0.0089917102 -0.0086173965 -0.0038371874 -0.0021441934 0.0080793490 -0.0081620137 -0.0004364144 -0.0032757620 0.0145860025 -0.0054086040 0.0193687239 -0.0290028987 0.0162330236 -0.0054762594 -0.0065526606 0.0015600306 0.0313694134 -0.0179882449 0.0145733357 -0.0180876062 -0.0174505836 0.0105743529 -0.0157475195 -0.0057723394 0.0070771616 -0.0235575175 0.0001123152 0.0183696503 0.0031193854 0.0118975426 -0.0009335586 -0.0043809481 0.0011016224 -0.0043862038 0.0086884351 0.0001661623 -0.0050790315 0.0053817624 0.0098189967 -0.0004655199 0.0040598836 -0.0016349139 0.0030848202 0.0000800004 -0.0020091201 -0.0066912889 0.0176363004 -0.0074927449 -0.0094925101 0.0099111171 0.0054414084 0.0036078112 0.0079964891 -0.0119604244 0.0127950943 0.0003453481 -0.0076152440 -0.0098929577 -0.0090618777 -0.0009200657 -0.0037799802 0.0136541941 0.0058848618 -0.0156132480 0.0173153215 0.0039307394 -0.0138801458 0.0837687002 0.0949927385 -0.0124320376 -0.0171243385 -0.0092412575 0.0005445120 0.0038273798 -0.0058267248 0.0128302400 -0.0104539942 -0.0151276691 0.0421634750 0.0058924890 0.0216254977 -0.0003274381 0.0005398982 0.0074620049 -0.0116469489 0.0104169843 0.0023597192 0.0037380257 -0.0046601510 0.0058635774 0.0047260867 0.0029192304 -0.0128020196 -0.0225081881 0.0304236215 0.0034401858 -0.0174674101 -0.0009614742 0.0084866091 -0.0134424395 0.0001209127 0.0077883173 -0.0140451502 -0.0007479043 0.0054879694 -0.0074463464 -0.0013316410 -0.0148328874 0.0059692524 -0.0036790964 -0.0056948093 0.0008554996 0.0352072412 -0.0055405891 0.0115444331 -0.0318095471 0.0072115507 0.0272577918 -0.0037046107 -0.0132952761 0.0028582002 0.0058531573 -0.0160605404 -0.0077009438 0.0427206023 0.0061165319 -0.0240635563 0.0498513552 0.0115809447 -0.0282047416 0.0207932452 0.0165100893 0.0122810075 0.0073152701 0.0341652557 -0.0079506221 0.0209773742 0.0168791049 0.0089308540 0.0276338283 -0.0030244708 0.0132722943 0.0013326236 0.0118390483 -0.0040995144 0.0191840976 -0.0022776880 0.0049973460 0.0178025222 0.0129393786 0.0061566196 0.0284554036 0.0115489379 0.0139470979 0.0444921494 -0.0221697347 0.0145843654 -0.0148318799 -0.0000047601 -0.0097431524 0.0312601712 -0.0195698357 0.0170828937 0.0183473685 -0.0005863532 0.0188241850 0.0075993377 0.0028862648 0.0535306863 -0.0249018099 -0.0376562870 0.0487356135 0.0544316050 0.0750055510 -0.0282813337 -0.0088115241 -0.0291901904 0.0486034518 -0.0025073588 -0.0092270822 0.0610684038 -0.0563588444 -0.0666051592 0.0927103119 -0.1051787079 -0.1386588536 0.0965727958 0.0128317332 0.0249154058 -0.0543401531 -0.0624926885 -0.1350117595 0.0884818691 -0.0634826494 -0.0999772390 0.1162228682 -0.0044693081 -0.0045924051 -0.0073321676 -0.0345842735 -0.0098135839 0.0076229681 -0.0723484033 0.0182893534 -0.0252279284 0.0319064049 -0.0412228892 -0.0092897647 0.0264194738 -0.0324073592 -0.0259508056 -0.0576767265 -0.0073055223 -0.0399707340 0.0904772390 -0.0348629425 0.0014817833 0.0507745540 -0.0349405460 -0.0891722862 0.1264955635 -0.0432263282 0.0607545068 0.0442410250 -0.0173660898 -0.1274771078 0.0064120749 -0.0552961634 0.0287084709 0.0298526194 -0.0274533765 -0.0015076318 0.0582550417 -0.0627010022 0.0904976437 0.0438215616 0.0270980284 0.0593568697 -0.1016058298 0.0122617424 0.1478722373 -0.0483276726 0.0082137314 0.1004389046 0.0645453823 -0.0074770306 -0.1414554106 -0.0305755826 0.0061342959 0.0157313446 0.2309154431 -0.0277607855 -0.3829992286 0.0135831273 -0.0080572387 -0.0704620406 0.0848972019 0.0014030806 -0.1435365951 -0.0571738177 0.0094707125 0.0947186567 0.2394679902 -0.0114431217 -0.4256556959 -0.0574997640 -0.0019755092 0.1061869804 -0.0002102063 -0.0089679574 -0.0158958549 -0.0040955990 -0.0179785692 -0.0439026742 0.0168914117 -0.0063838427 -0.0220758873 0.0187983233 -0.0001594364 -0.0011156895 -0.0277967065 -0.0069716228 0.0036093190 -0.0374684253 0.0091030167 0.0209889897 -0.0282106181 -0.0216961719 0.0123349041 -0.0241789000 0.0045108552 -0.0120182612 -0.0042655593 0.0152365457 0.0154164582 -0.0157075814 0.0173202792 0.0193548881 -0.0012189510 0.0148528506 0.0067047725 -0.0228458777 0.0011393201 -0.0096718719 -0.0175840745 0.0209566611 0.0325383454 -0.0131458422 -0.0027435141 -0.0003837339 -0.0101118411 0.0016092440 -0.0005222094 0.0018365101 -0.0033681246 -0.0008991783 -0.0020340223 -0.0046567438 0.0029606095 -0.0011363596 -0.0021716889 -0.0125965261 -0.0094111117 -0.0076748626 -0.0085199230 -0.0173486958 0.0292223220 0.0324294497 -0.0132288037 0.0000898545 -0.0088954238 0.0254146284 0.0031203938 0.0219951076 0.0194754769 -0.0117666405 -0.0299223778 -0.0815715806 -0.0459967973 -0.0516852862 -0.0622165266 0.0965491822 -0.0033483284 -0.0613061416 0.0634753047 0.0193035356 -0.1012943618 0.0629953955 -0.0867468619 0.0622480830 -0.0374192512 0.0765965858 -0.0337468695 -0.0200530799 0.0178767515 0.0450124421 -0.0660966210 0.0373862269 -0.0185690796 0.0821640226 -0.0152751103 0.1763775868 -0.1822746696 0.1307551960 0.0186457421 -0.0615359814 0.0208352021 0.2107713864 -0.1389455400 0.1421463606 -0.0833503821 -0.0484221311 -0.0323951636 -0.0293020744 -0.0796517858 0.0504759079 -0.0692111643 -0.0381685054 0.0884698302 0.0648462866 -0.0471487163 0.0234620059 0.0179922022 -0.0520942016 -0.0084214623 0.0118757809 0.0132784448 -0.0154887134 0.0256121302 0.0256819372 -0.0082006028 -0.0151161894 0.0281993271 -0.0070177969 -0.0273330568 0.0159537009 -0.0240720524 -0.0074840034 0.0578691498 -0.0533645840 -0.0015352362 0.0722175808 -0.0120614718 -0.0622066635 0.0775378543 0.0093760562 -0.0692646962 0.0624278024 -0.0450169460 0.0355956911 -0.0918999676 0.0010469474 0.0600371349 0.0306724061 -0.0052210191 0.0545636701 0.0277682082 0.0018191482 0.0036211013 -0.0012677340 -0.0004788916 0.1050618183 0.0011868408 0.0552927456 0.0014149765 0.0110937420 -0.0507701273 0.0570336703 0.0977712726 -0.2330758273 -0.0267659434 -0.1088232651 0.0024082697 0.0017387141 -0.0488351247 0.0618253923 -0.0524508882 -0.0188524287 -0.0202757277 0.0264136150 -0.0305686950 -0.0263309788 -0.0077940933 0.0652943425 0.0901540338 -0.1274925489 -0.0198752048 0.0675672598 -0.0025631311 -0.0650782337 0.0651376830 0.0134739569 -0.0509071590 0.0489726261 0.0017330423 -0.0464059844 0.0584866204 -0.0052905254 0.0519813385 -0.0256112307 0.0277606428 0.0408909167 0.0003641546 -0.1741436847 0.0183434166 -0.0863082519 0.1498514094 -0.0353616881 -0.1352314788 0.0251992463 0.0560043292 -0.0252093730 -0.0300224746 0.0761109844 0.0340274778 -0.1905185881 -0.0322768012 0.1092496304 -0.2138030018 -0.0620129366 0.1152844755 -0.0815458320 -0.0825111190 -0.0669702856 -0.0061653134 -0.0052788563 -0.0060163208 -0.0053459919 -0.0105968696 -0.0055248445 -0.0069907184 -0.0000071669 -0.0006538288 -0.0023890450 0.0066090789 0.0001866215 -0.0011701288 -0.0001670489 0.0022863814 -0.0039636563 -0.0051600145 -0.0063027078 -0.0052913803 -0.0220131138 -0.0019217746 -0.0070029718 -0.0086203505 0.0079074733 0.0044893260 0.0041927583 0.0018059219 0.0046892091 -0.0031469522 0.0060391890 0.0024001912 -0.0078268359 -0.0094443989 0.0020950846 -0.0044027408 0.0005008126 0.0049485070 0.0004160508 -0.0011652366 0.0034952890 0.0031521052 -0.0011746996 0.0013138821 -0.0029014687 0.0023342574 0.0031644745 -0.0018469970 0.0001604621 -0.0021323837 -0.0109487188 0.0032332339 0.0034788578 -0.0037334310 0.0018362200 -0.0022554930 0.0015308511 -0.0006090534 -0.0019248916 -0.0073325592 0.0044531707 0.0016304762 -0.0027180850 0.0001158123 0.0003508949 -0.0013568233 0.0003914778 0.0094374654 0.0019010599 -0.0024139493 -0.0024689098 0.0019696170 -0.0003898073 -0.0030070715 -0.0002077978 -0.0006044045 0.0019241061 -0.0104164369 -0.0172289718 -0.0234948865 -0.0049389594 -0.0275992240 0.0372717160 -0.0104885300 0.0085370488 0.0172315692 -0.0075374394 -0.0352154853 0.0665512147 -0.0170053961 0.0493969850 0.0172436020 -0.0040462958 -0.0413073214 0.0100953065 -0.0191516512 0.0144265819 0.0136980379 -0.0056275870 -0.0077119648 0.0381712297 -0.0233766315 0.0564625546 0.0225207440 0.0122408315 0.0197247796 -0.0077523793 0.0039777561 0.0050260842 0.0048888171 0.0036033144 0.0061434730 0.0027078771 0.0081333809 -0.0045754371 0.0038929210 0.0033009982 0.0013315298 0.0096660755 0.0069699261 -0.0129589360 0.0019060485 -0.0050700988 -0.0061774741 0.0146434525 0.0016443392 0.0006866389 0.0102072963 0.0027816437 0.0119281035 0.0202757536 0.0013388401 -0.0093597130 0.0104537511 -0.0005696032 0.0149610722 0.0330603808 0.0709895542 0.1069079962 0.0247917883 0.1193370723 0.1768671368 -0.0097106318 0.1266081749 0.1840919786 -0.0709694443 0.0472652357 -0.0016689829 0.0826643482 0.0708350246 -0.0474234245 -0.0502741973 0.0615344179 -0.0284350350 0.1792628482 0.0888063366 -0.1114841064 0.0478775693 0.0838939680 -0.1395068107 0.0083758344 -0.0651607126 -0.0359964572 0.1206682973 -0.0472943746 -0.0167461117 0.0327712476 -0.0276683487 -0.0289830020 0.0183992559 -0.0070120290 0.0602389694 -0.0543125649 -0.0443416775 -0.1230192919 0.1288126297 -0.0070393281 -0.0335658748 0.0564834637 -0.0172676731 0.0500166120 -0.0306467874 0.0370355276 -0.0075379363 -0.0027406590 -0.0014549209 -0.0095020498 -0.0670822004 0.0347964078 0.0659244580 0.1515339100 -0.0692263425 -0.0211277109 -0.0821375416 -0.1081099208 -0.1153827412 0.0499345460 0.1451296756 -0.0114559557 -0.1631790167 -0.0358292646 0.0873423811 0.0944208687 -0.0458899509 0.1739010487 -0.0614197869 -0.1967839148 0.1044349431 -0.0564415284 -0.0359795255 0.0378195207 -0.0733598624 -0.0173502757 0.0262103486 -0.0228184083 0.0449235665 -0.1113913005 0.0298225113 -0.0695265904 0.0109653337 -0.0765670070 -0.0312930153 0.0158846727 0.0740281063 -0.0362323543 0.0016221344 0.0128581646 0.0984218678 -0.0851135227 0.1038806556 -0.2678294764 0.0127854675 -0.0680793223 -0.0405832205 0.0625140992 0.2414305444 -0.0507794733 0.1244210049 -0.0586643530 -0.1345444816 0.0239278128 -0.0525375161 -0.0132445860 -0.0212068684 -0.1034847181 0.0553803960 -0.0034166416 0.0081306852 0.0238302712 -0.0176701356 -0.0092496264 0.0058073367 0.0211156338 0.0305915494 0.0106376699 -0.0030569470 0.0040740949 0.0245154123 0.0054720809 -0.0009815462 -0.0072864010 0.0222361268 0.0043827287 0.0064182347 -0.0017361393 0.0448376846 -0.0089531864 0.0026385736 0.0277261190 0.0187919633 0.0300778032 0.0113287670 -0.0292421116 0.0351640810 -0.0038911237 -0.0127064101 -0.0225187722 -0.0161318016 -0.0011077053 0.0231401217 0.0698720334 0.0806267929 0.0098465622 0.0060621123 0.0225528637 0.0691220179 -0.0594236815 -0.0450858152 0.0373348244 -0.0112770663 -0.0013841518 -0.0075570012 0.0015555572 0.0022281118 0.0090920489 -0.0102423341 -0.0109602121 0.0374327050 0.0043772707 0.0120875262 0.0003401118 0.0015039153 0.0022319556 -0.0095951582 0.0051706020 0.0014214879 0.0008114837 -0.0017726307 0.0031349332 0.0019733039 0.0036696966 -0.0027858915 -0.0081455664 0.0124862025 0.0039697030 -0.0069413912 -0.0062948773 -0.0017313455 -0.0158903734 0.0103090519 0.0020298219 -0.0067592563 -0.0047529895 0.0148555772 -0.0030039954 -0.0105358026 -0.0172246285 0.0006249021 -0.0044564440 -0.0096372209 -0.0029450801 0.0305989318 -0.0063303070 0.0093212891 -0.0192609526 0.0032518328 0.0195717565 -0.0025793141 -0.0096181011 0.0042036349 0.0089171489 -0.0143677475 -0.0078418806 0.0168674716 0.0042851750 -0.0132658533 0.0201093472 0.0095428713 -0.0110637964 0.0098763570 0.0076960428 0.0044277870 0.0448077986 -0.0590950995 0.0656471089 0.0173334616 0.0320804074 0.0100964824 0.0011889408 0.0472667393 -0.0438172711 0.0243127769 -0.0696723983 0.0135461612 -0.0248213601 0.0179810297 -0.0280071117 -0.0128732587 0.0274033677 0.0127567271 0.0117509738 0.1218577298 -0.0203875601 -0.0054154885 0.1276111064 -0.1106816129 0.0102266515 -0.0291720766 0.0221299809 -0.0874328168 0.0922844705 -0.0832254207 -0.0794686886 0.1184219936 -0.0208893388 -0.0120799042 0.0315002481 -0.0038070992 -0.0024955960 0.0368406473 -0.0238261951 -0.0429065309 -0.0556702271 0.0173648760 0.0122610464 0.0263771836 -0.0261902156 0.0019168887 0.0206594018 -0.0042024546 0.0331412408 0.1159282202 -0.0341635020 0.0354143147 0.1154248405 -0.0751606203 -0.0069302470 -0.0253086634 0.0205411569 0.0732280178 0.1015807309 -0.0668980820 0.0696571576 0.0909088291 -0.0363402217 -0.0282106887 0.0081068182 0.0119766251 0.0109636538 0.0184844322 0.0066557827 0.0345197749 -0.0056488508 0.0062582460 0.0079190981 0.0115733963 0.0079133605 -0.0022834294 0.0555320202 -0.0086814205 0.0525956692 0.0377710834 0.0755405996 -0.0739539598 0.0324514342 -0.0248271328 -0.0121037136 -0.0131451715 0.0851248756 -0.1518665799 0.0508055760 -0.0673079378 0.0052397874 -0.0332148110 0.1433469527 0.0012033726 0.0338821668 -0.0209949568 -0.0410202739 -0.0102566672 -0.0164957100 -0.0205073620 0.0349011464 -0.1187486219 -0.0807888005 -0.0440359609 -0.1101037852 0.0346490459 0.0121402832 0.0010013433 -0.0082705692 0.0235400876 -0.0646915588 -0.0249487010 -0.0276088559 0.0196356536 -0.0066808485 -0.0355645256 -0.0332564420 -0.0872336368 -0.0192188006 0.0382539673 0.0179109278 -0.0075438188 -0.0363754427 -0.0480957795 0.0044819846 -0.0127518717 -0.0666598486 -0.0300351366 -0.0277379305 -0.0471542494 0.0035150337 0.0632179393 -0.0904843774 -0.0238621640 0.0103189846 0.0014260566 -0.0163216303 -0.0154631931 0.0047662396 -0.0270030457 -0.0260793866 0.0046214707 -0.0307009095 -0.0313573794 0.0192905563 -0.0130219081 0.0052282215 -0.0214116563 0.0140021779 -0.0106212392 -0.0412427654 0.0693111324 0.0468795298 0.0033206073 -0.0493907402 0.0121173081 -0.0308642861 0.0305429719 -0.0620881267 0.0019419723 -0.0754393661 -0.0614331805 0.0882880018 -0.0786685963 -0.0537766841 0.0118419690 -0.0630430869 -0.0324566112 0.0463439190 -0.0157041407 -0.0004776755 0.0299966926 -0.0825316676 -0.1366441678 -0.0290488647 -0.0534447915 -0.1223585206 -0.0365047130 -0.0015936159 0.0101097011 -0.0299298768 -0.0366495446 -0.0306354782 -0.0147132121 -0.0542805694 -0.0682031920 -0.0952163348 -0.0287305103 -0.0460659585 -0.0774136147 -0.0173932623 -0.0375511579 0.1002474135 -0.0526156558 -0.0512559784 0.0029325305 0.0037300593 0.1071659644 -0.0717741292 0.0807579549 -0.0565675345 0.0834112549 0.0472698140 -0.0244659945 0.0164679860 0.2066956088 -0.0812192030 0.0430458248 0.0949311601 -0.1072909109 0.0359606143 0.0441411168 -0.0739858750 -0.0818934193 0.0369583626 0.1026212607 0.0071231878 0.0104479463 0.0710465637 0.0701023823 0.0202789943 -0.0501746847 -0.0115178028 -0.0361052645 0.0129254003 -0.0942694752 -0.0383620470 0.0831251841 0.0884344659 0.1248261749 0.1775479611 0.0949303415 0.0015751203 -0.0782674447 -0.0512683950 -0.1500664603 -0.0479857248 -0.0030754683 0.1120346324 0.0516910187 0.0087093037 -0.0077661076 0.1141786195 0.0431861820 -0.0693191324 0.1283316852 0.0054468397 0.0166132050 0.0539473475 -0.0051571621 -0.0206226431 -0.0851695405 -0.0257313384 -0.0219935157 -0.0175812882 0.0399036457 0.0086217849 -0.0226666702 0.0288048485 0.0057849205 -0.0374840059 -0.0253301940 -0.0302453527 -0.0319347034 0.0009599475 -0.0199655627 -0.0730511969 0.0104611333 -0.0141406367 -0.0696738849 0.0037237565 0.0097575404 0.0096700961 -0.0053962689 -0.0100267219 0.0014849157 -0.0121191857 -0.0142183159 -0.0869215585 -0.0244705300 -0.1043589185 -0.1345353662 0.0310453961 0.0264193769 -0.2109905576 -0.0332195273 -0.0215898467 0.0419232265 0.0129035897 -0.0146432158 0.0340009291 0.0035998385 -0.0125268412 -0.0032351088 0.0167146931 0.0157346749 -0.0456938290 -0.0009775678 -0.0107321956 0.0015546362 0.0006090722 -0.0054350662 0.0085885495 -0.0049091444 -0.0032202082 -0.0015157073 0.0035073105 -0.0039229162 -0.0029973842 -0.0051236494 -0.0039462194 -0.0055916262 0.0022379981 -0.0056868559 -0.0043537435 -0.0041362007 -0.0161753082 0.0080572024 -0.0011921100 -0.0048876879 -0.0080608359 -0.0014167755 -0.0148422459 0.0178505521 -0.0073903624 0.0033039332 -0.0106487296 0.0104847288 0.0028249505 0.0006823875 -0.0121961532 -0.0009287086 -0.0113217074 0.0189243423 -0.0041050877 -0.0181105566 0.0041691529 0.0066927312 -0.0046841348 -0.0055030699 0.0114217587 0.0056466278 0.0027066280 -0.0041387802 0.0039115912 0.0041063369 -0.0101058533 -0.0054369538 -0.0005436573 -0.0023366270 -0.0002364614 0.0291564645 -0.0293780977 0.0502979535 0.0130818909 0.0259951053 0.0215352371 0.0064707811 0.0237449026 -0.0227501911 0.0169418130 -0.0453831692 0.0062803412 -0.0137470763 0.0123398102 -0.0160001672 0.0004722816 0.0231665485 0.0247485765 0.0146897849 0.0887937216 0.0030217189 0.0087904488 0.0727320563 -0.0694664483 0.0029558661 -0.0224022897 0.0047080269 -0.0596563534 0.0527575126 -0.0514182073 -0.0406043095 0.0712304261 0.0132149304 -0.0019999129 0.0265907198 0.0244088213 -0.0020089503 0.0230757072 -0.0063255452 -0.0281527934 -0.0368943004 0.0112257805 0.0084876557 0.0151835124 -0.0059265366 0.0001136641 0.0248574121 0.0252756604 0.0222116398 0.0882803872 0.0073299067 0.0163125650 0.0775331578 -0.0462751001 -0.0045525510 -0.0217877297 -0.0066240384 0.0547910185 0.0522423359 -0.0347293956 0.0474526188 0.0643028495 0.0130606570 -0.0094729050 0.0066092634 0.0004004943 -0.0077099416 0.0084226785 0.0033286485 -0.0024165868 0.0083395819 -0.0090487426 0.0252887271 -0.0064018268 -0.0001041615 0.0023671032 0.0320982685 0.0533819768 0.0763636558 0.0181630322 0.0716740298 -0.1045000552 0.0278899974 -0.0111239183 -0.0599388689 0.0207554496 0.0965481191 -0.1915572053 0.0474999472 -0.1263858701 -0.0727529771 0.0097121925 0.0970235458 -0.0085986210 0.0616263485 -0.0338933695 -0.0360013967 0.0136789930 0.0183441996 -0.0864326998 0.0742088646 -0.1463005697 -0.0629634309 -0.0513232478 -0.0727272117 -0.0624954485 0.0351267297 0.0802742730 -0.0073478158 0.0289069302 0.0573138925 0.0307061660 0.0418407164 -0.0419010114 0.0286592536 -0.0041203910 0.0170144717 0.1087804666 0.0319975002 -0.1664705438 0.0413001415 -0.0577486597 -0.0704749728 0.0911305635 -0.0072787283 -0.0283691450 0.0388181454 -0.0058348850 0.0846104324 0.1890650059 -0.0145224174 -0.1581195976 0.0477888476 -0.0162834437 0.0796505899 0.0144299750 0.0305427004 0.0277547618 -0.0033817199 0.0413887130 -0.0013769942 0.0363971173 0.0786563826 0.0641294672 -0.0036994691 0.0392561746 -0.0060598658 -0.0085747207 -0.0030990757 -0.0006692892 -0.0657603944 -0.0272049864 -0.0120526346 0.0212335891 0.0314494186 -0.0375529964 -0.0108350700 0.0092121336 -0.0261856695 0.0028759526 -0.0289930270 -0.0272016113 0.0160336088 -0.0350813434 -0.0547889798 0.0020059113 -0.0337755934 -0.0096171079 0.0131495542 -0.0085165235 -0.0166062641 0.0540413057 -0.0556645484 0.0059555169 -0.0656792110 -0.0439461290 -0.1267031482 -0.0606390032 0.0034149411 -0.0243121933 -0.0154632134 -0.0538631607 -0.0380482061 -0.0280508171 -0.0638465983 -0.0327800866 -0.0684029816 -0.0452039677 -0.0795798722 -0.1424780797 0.0739139698 -0.0633513694 0.0509482105 -0.0570551554 0.0492359024 0.0179915024 -0.0502739995 0.0810327175 -0.0117839542 0.0479259011 -0.0946494735 0.0435206939 0.1012470698 -0.1081704674 -0.0314776592 -0.2153363370 0.0156914823 -0.0339493374 -0.0479935155 0.1117999455 -0.0548555152 -0.0260157039 0.0984709384 0.0487525074 -0.0422985976 -0.1338562827 -0.0065929935 -0.0048378379 -0.0252523113 -0.1008592430 -0.0615759368 0.0478918639 -0.0012831629 -0.0032501222 -0.0196665316 0.1060276952 0.0810248478 -0.0686645932 -0.0767774055 -0.1596136406 -0.1346405111 -0.1038748340 -0.0592753800 0.0593603325 0.0782842279 0.1096280639 0.0717253094 -0.0189975268 -0.1526814959 -0.0647463016 -0.0219672068 0.0056005642 -0.1282949790 -0.0667619326 0.0758698897 -0.1293359254 0.0099003956 -0.0335369885 -0.0591234991 0.0087082577 0.0134255757 0.0993346338 0.0341205600 0.0291567471 0.0156252376 -0.0356698131 -0.0162720058 0.0273869230 -0.0377934974 -0.0016698240 0.0426980697 0.0259963472 0.0372533485 0.0314233352 -0.0113823727 0.0498368579 0.0694862768 -0.0309366034 0.0384265646 0.0638601680 -0.0349497393 0.0264076120 -0.0114491864 -0.0133883975 0.0307111032 -0.0160624493 0.0110632318 0.0105176525 0.1002360157 0.0639024012 0.1318113492 0.1229627560 0.0351672424 0.0634281939 0.1768310655 -0.0596944033 -0.0710797228 0.0574331133 -0.0103327240 0.0214172490 -0.0449501989 -0.0061542353 0.0149841045 -0.0009400878 -0.0190247610 -0.0187194839 0.0456768442 0.0028233827 0.0106861149 -0.0011611386 -0.0002652205 0.0036821411 -0.0076831616 0.0022914542 0.0025683022 0.0015056330 -0.0024853503 0.0031786524 0.0020264822 0.0029184241 0.0057347015 0.0107783668 -0.0093582535 0.0062834161 0.0101276904 0.0019215579 0.0136300452 -0.0096177782 0.0038212849 0.0030861287 0.0117560980 -0.0008495336 0.0180756371 -0.0140434372 -0.0035623240 -0.0037695457 -0.0006392164 -0.0091919084 -0.0056117451 -0.0013859164 0.0172879327 -0.0017648931 0.0099175215 -0.0131116765 0.0026798979 0.0153030253 -0.0044543636 -0.0042277979 0.0068446999 0.0080310390 -0.0102275196 -0.0054007392 -0.0112341718 0.0042643609 0.0021625179 -0.0140934000 0.0105567050 0.0128573460 -0.0050360465 0.0007959858 0.0011827326 -0.0203668359 0.0625547968 -0.0282865256 -0.0010230087 0.0194145956 0.0110092120 0.0235549203 -0.0262223261 0.0443764588 -0.0032653968 0.0295043063 0.0012563789 0.0301930232 -0.0154310954 0.0340805723 0.0126006013 0.0260203115 0.0056675475 0.0079865962 -0.0202239189 0.0278247132 0.0403020541 -0.0764708357 0.0740518755 -0.0168371557 0.0069316891 -0.0349053743 0.0667924502 -0.0733402052 0.0716503208 0.0387777133 -0.0197210575 0.0287304454 0.0016037650 0.0085770640 0.0117029571 0.0216919139 0.0290083992 -0.0340266497 -0.0426377423 -0.0689139387 0.0159874331 0.0329074747 0.0211025028 -0.0299468066 0.0068104370 0.0047963905 0.0148799592 0.0494288899 0.1035235797 -0.0206443013 0.0777161285 0.1322197656 -0.0970560064 -0.0171159333 -0.0239102998 0.0189569560 0.1202892623 0.1017607063 -0.0858028965 0.0792995121 0.0760077382 -0.0142640167 0.0313480891 -0.0000227892 -0.0251869806 -0.0514273156 -0.0197841499 -0.0014109979 0.0166222404 0.0069116200 0.0064108968 -0.0094920091 0.0213168747 -0.0005442320 0.0089444015 0.0095549792 0.0438258566 0.0148244333 0.0120710472 -0.0140489030 -0.0303187238 0.0106592119 0.0207949695 -0.0453556410 0.0143138763 0.0055620938 -0.0536224519 0.0161184827 -0.0120300318 -0.0778186475 0.0094887792 -0.0338651681 0.0009374135 0.0288256579 -0.0267162269 0.0095104540 0.0040334527 0.0294431140 -0.0136317168 0.0321396069 -0.0371228108 0.0350301169 -0.0344134052 0.0487885579 -0.0804567797 0.0248183019 0.0814081683 0.0094306642 0.0136553552 0.0554100172 0.0311447162 0.0564372289 -0.0235279228 0.0500704505 0.0110221193 0.0131757989 0.1269292247 0.0435339172 -0.1388493787 0.0662017373 -0.0579998463 -0.0985399140 0.1081128732 -0.0141752367 -0.0158818909 0.0681389090 0.0092133467 0.1082324865 0.1846953018 -0.0191730270 -0.1474384733 0.0707497128 0.0029418433 0.1115253377 -0.0186885276 -0.0365939271 -0.0321957025 0.0036690737 -0.0452429487 0.0138598027 -0.0504169181 -0.0965997668 -0.0753794285 -0.0043880193 -0.0514886580 0.0044605878 0.0199460956 0.0125117680 -0.0008197679 0.0877456674 0.0428711245 0.0146602821 -0.0088197116 -0.0307084411 0.0400103628 0.0266996121 0.0034011377 0.0273167716 0.0049852346 0.0039973397 0.0104786758 0.0099408938 0.0033109823 0.0094032888 0.0162921296 0.0017799357 0.0205205784 -0.0331923692 0.0023581776 0.0313664222 0.0065616642 -0.0158158144 0.1155930446 0.0587421684 0.0256525690 -0.0713940284 -0.0130959628 -0.0007452855 0.0111112981 0.0072645274 0.0164498503 0.0068154571 0.0063979983 0.0058150960 0.0206261036 -0.0081287923 0.0128480182 0.0749630123 -0.0019767335 0.1224165701 -0.0758641449 -0.1052548388 -0.0982523527 0.0713379775 0.0708129559 0.0164827725 -0.0253925029 -0.0434313049 -0.0640026306 -0.0185085400 -0.0588305819 0.0164599235 0.0983073556 0.0664506828 0.0530980651 0.0449515088 0.0498575332 -0.0705164726 -0.0273031307 0.0198462743 -0.0086721047 -0.0697204245 -0.0626291681 0.0790506980 0.0249822573 0.0329779544 -0.0437861886 -0.0097778699 0.0246901185 0.0671774498 -0.0407601533 0.0620376462 -0.0129335476 0.0293237887 -0.1326782844 0.0113711464 -0.0387063867 0.1966855636 -0.0899504172 0.1174832722 0.0365737919 0.0553644415 -0.0096673783 0.1511803571 -0.1546787371 0.0573529664 0.0508120213 0.0482397874 0.0720683183 0.0378540183 0.0262012875 0.0590209305 0.0669460455 -0.0017616972 0.0244617784 -0.0331256355 0.0416388327 0.0286557932 -0.0134724293 0.0121970949 -0.0560023293 -0.0270578310 -0.0240053459 0.0003568978 0.0068406410 0.0096186307 -0.0171091153 0.0292864655 -0.0139904367 -0.0225113644 -0.0084947853 -0.0290362425 -0.0055747130 0.0129234580 -0.0601156067 -0.0172353503 0.0204358717 -0.0486162374 -0.0388402584 0.0523694696 -0.0601416812 0.0073142006 0.0338131676 -0.0442698441 0.0334987915 -0.0174732676 0.0282152744 -0.0598291485 -0.0342399723 -0.0869189897 -0.0121671920 -0.1021363080 -0.0563958880 -0.0080860797 -0.0827968279 -0.1113426406 0.0599519700 -0.0014035623 -0.0094509743 0.0087720739 -0.0003893607 -0.0089090798 0.0024984150 0.0036482200 -0.0039265072 0.0002646886 0.0004951317 0.0035049586 0.0005310635 0.0002097909 0.0036221763 -0.0044090837 0.0047272401 0.0032251511 0.0020568602 -0.0031541121 0.0026112529 0.0028781084 -0.0061504612 -0.0057925293 -0.0058372023 0.0038692424 -0.0002987069 -0.0026668906 -0.0025447592 -0.0060360035 -0.0034109407 0.0021430523 0.0039510032 -0.0110027681 -0.0014970149 0.0040675697 -0.0010427027 -0.0008456571 -0.0027466200 -0.0008665810 0.0021246833 -0.0076791056 -0.0013505668 0.0144024689 0.0006198687 0.0119459427 -0.0052529261 0.0024821836 0.0059869710 -0.0037676388 0.0008134610 0.0042677986 -0.0009410186 -0.0004391391 0.0012318237 0.0079115673 0.0010497846 -0.0027628431 0.0103769561 0.0005855765 -0.0063157057 -0.0000192281 0.0047178254 0.0078841877 -0.0520338379 0.1161110660 -0.0799326696 -0.0110316426 0.0224812527 -0.0044386265 0.0368085940 -0.0535875577 0.0878066692 -0.0127545175 0.0759095947 0.0016303241 0.0610172294 -0.0326062599 0.0708274644 0.0142485723 0.0355828560 -0.0156942267 0.0013906832 -0.0806370185 0.0338835702 0.0664868265 -0.1790692118 0.1747146133 -0.0255134788 0.0226016429 -0.0606203293 0.1576611132 -0.1573572776 0.1599079534 0.0820682692 -0.0603152723 0.0201307534 -0.0109900351 -0.0127591232 -0.0146114580 0.0361558036 0.0374595375 -0.0716048580 -0.0495519339 -0.0861773595 0.0101550940 0.0543472877 0.0274071547 -0.0639037281 0.0054802366 -0.0301825678 -0.0052758918 0.0516480599 0.1087518952 -0.0577019346 0.1190588836 0.1769439226 -0.1526617037 -0.0265468473 -0.0173464592 0.0603005162 0.1774617397 0.1543373152 -0.1441907399 0.1015178567 0.0705051443 -0.0508688596 0.0533335703 -0.0038156895 -0.0442579155 -0.0817676846 -0.0346647537 -0.0042397793 0.0582710512 -0.0094504969 0.0333719447 -0.0573260945 0.0547124411 0.0079003190 0.0010759279 0.0109572591 -0.0260179304 -0.0587623550 0.0248468225 -0.0809817713 0.0524916361 0.0023048369 0.0356291361 0.0049674620 -0.0174852306 -0.0735986181 0.0968701515 -0.0063955080 0.1445653252 -0.0096796873 -0.0253613603 -0.0835061880 0.0171757960 -0.0202793288 0.0007454695 0.0339574028 -0.0216059807 0.0065554455 0.1087408719 -0.0353641389 0.0987986759 0.0905045570 -0.0112997982 0.1127491231 -0.0184086292 -0.0119268331 0.0381673652 0.0207652694 -0.0103328353 -0.0479255861 -0.0036009755 -0.0065862195 0.0334707139 0.0357721585 -0.0012648978 -0.0368460022 0.0090570928 -0.0089979537 0.0252049181 0.0829905571 0.0019916984 -0.1046322363 0.0046636036 -0.0087546427 -0.0257328510 -0.0247574614 0.0059260927 0.0408484603 -0.0095085989 -0.0076549261 -0.0147677593 -0.0678937030 0.0225452314 0.1053800895 0.0048472588 0.0052372085 -0.0012872754 -0.0056533291 0.0096153121 -0.0211946180 0.0228065816 0.0242381053 0.0081777506 0.0014819389 0.0065996165 -0.0056284817 -0.0084501633 -0.0086693841 0.0012570289 -0.0192808888 -0.0168211365 -0.0045334548 -0.0012929731 -0.0010273608 -0.0074253707 -0.0066246598 -0.0053943720 0.0018987032 0.0011482620 -0.0019743811 0.0111363320 -0.0155619447 -0.0016709890 -0.0106571941 -0.0101718847 -0.0031903065 -0.0023456230 0.0128794996 -0.0036538771 -0.0154342825 0.0137485152 -0.0001337991 -0.0153791905 -0.0558252025 -0.0173208859 0.0377805836 -0.0110362691 -0.0000306017 -0.0104343928 -0.0026339773 -0.0235329213 -0.0031397488 -0.0155006815 -0.0139061646 0.0076765187 0.0018506042 -0.0206183102 -0.0478942708 -0.0295717157 -0.0374001183 0.0167950908 0.0452649392 0.0349928483 -0.0175788279 -0.0246409811 -0.0194729950 0.0080027319 0.0255491516 0.0216835111 -0.0104655439 0.0136411380 0.0170539620 -0.0609362350 0.1513853489 -0.1375358540 0.0774268880 0.0567842342 -0.1221439218 0.0447613062 -0.0115301311 0.0053262801 -0.0416656702 -0.1090057964 0.1213809522 -0.0771970776 0.0827453410 -0.0769202621 -0.0188856299 -0.0242063034 0.0786051565 -0.0231147630 0.1137441478 -0.0460292417 0.0641972567 -0.1785232887 0.0956048279 -0.1179141270 0.3722671651 -0.3129263473 0.1584957906 0.0288023511 0.0332177405 0.0304168907 0.3754380276 -0.2438327973 0.2071293801 0.1112368306 -0.0439943860 0.0717421057 0.0868419895 0.0755549132 -0.0216563892 0.1102889419 0.0865999680 -0.1130423901 -0.0442816569 0.0116693855 0.0006394924 0.0008676397 0.0260732416 -0.0083057411 -0.0343698306 -0.0177664810 0.0072867123 -0.0304034145 -0.0218295189 0.0047713673 0.0154068928 -0.0091878878 -0.0049617858 0.0132480211 -0.0087659978 0.0104687958 -0.0283265204 -0.0370221082 0.0280807425 -0.0358972279 -0.0541027809 -0.0206292145 0.0422352050 -0.0319677211 -0.0247213675 0.0467238477 -0.0216945853 0.0416289556 -0.0050805138 0.0424557869 -0.0122199525 -0.0171687437 -0.0707341321 0.1099543518 -0.1107576124 -0.1005771856 0.1485377365 0.0395802333 0.0492791801 -0.0320136110 -0.0091219193 0.0024588916 -0.0369309964 -0.0088024763 -0.0024248536 0.0017146055 -0.0186190669 -0.0286273849 0.0476178551 0.0052182925 0.0210518978 -0.0002741864 -0.0009115869 0.0090114579 -0.0137981319 0.0127060670 0.0045136077 0.0048491180 -0.0068470904 0.0081865067 0.0069772079 -0.0108531711 -0.0025024698 0.0030251496 -0.0082382410 0.0069658914 0.0121402360 0.0020697650 0.0165896762 -0.0138957299 -0.0025221293 0.0092233266 -0.0070527445 0.0003924352 0.0103323785 -0.0168607185 0.0055139135 -0.0062663085 0.0053610197 -0.0010109804 -0.0056363823 0.0013756882 0.0318939748 -0.0014874187 0.0160510684 -0.0310157879 0.0092098489 0.0281183882 -0.0063539500 -0.0083417379 0.0060479706 0.0029854839 -0.0119819385 -0.0044231689 -0.0028958160 0.0071848991 0.0050206254 -0.0012789781 0.0111769507 0.0079233557 -0.0098136346 0.0092683725 0.0186031248 0.0054043281 -0.0232184723 0.0110357263 0.0000431967 -0.0115906917 -0.0029729795 -0.0115474132 0.0139401660 -0.0194491668 -0.0008612604 -0.0079282304 -0.0022089218 -0.0121471722 0.0006609963 -0.0103972344 -0.0067478408 -0.0094637766 -0.0015509184 -0.0004525371 -0.0038811664 -0.0056819402 -0.0113676511 0.0273580589 -0.0305106542 0.0067355955 0.0005031444 0.0132471958 -0.0245064486 0.0133091240 -0.0206586451 -0.0140621467 0.0038592590 -0.0081626723 0.0090735927 0.0036580472 0.0014304208 -0.0148770728 -0.0212352888 0.0349703772 0.0236426857 0.0403057826 -0.0030824926 -0.0261009084 -0.0135182550 0.0308316946 -0.0012989058 0.0130951866 -0.0031181965 -0.0194438886 -0.0582094814 0.0216117836 -0.0517205246 -0.0905603205 0.0777787505 0.0118881877 0.0088198387 -0.0280400878 -0.0886883900 -0.0747863343 0.0712728273 -0.0533256789 -0.0369631975 0.0174523502 -0.0115562763 -0.0006946110 0.0092814111 0.0225817552 0.0085576528 -0.0001638544 -0.0281325170 0.0049292508 -0.0154493803 0.0245453478 -0.0241097035 -0.0048133620 -0.0072549407 -0.0054877476 0.0045547223 0.0138307868 -0.0092551523 0.0095501867 -0.0130453542 -0.0004001285 -0.0020130157 -0.0072327103 0.0105868626 0.0169535385 -0.0112619501 -0.0010433103 -0.0194226777 -0.0037923981 0.0111206306 0.0213018738 0.0005072843 0.0071840935 0.0023538629 -0.0057692676 0.0097418210 -0.0029136143 -0.0194774277 0.0107384931 -0.0075461198 -0.0146828852 0.0026099610 -0.0231842542 0.0052846766 0.0055877314 -0.0301522263 0.0062399994 0.0011566206 0.0139874303 -0.0021722926 0.0155742452 -0.0080510349 -0.0086497979 0.0074785007 0.0152595199 -0.0130589309 0.0171449455 0.0171369393 -0.0412456173 -0.0058993065 0.0481516071 0.0094483085 0.0035635799 0.0264328846 0.0331272802 0.0030326312 -0.0095403620 -0.0021959864 0.0048318514 0.0411506161 0.0486279355 -0.0071830392 -0.0283175084 -0.0143721217 -0.0309034119 -0.0439102312 -0.0122478254 -0.0250070655 -0.0240972984 -0.0155413785 -0.0572798730 -0.0695336368 -0.0149182553 -0.0509827776 -0.0171525713 0.0144156701 -0.0036830957 -0.0018068883 0.0730810860 0.0256584668 0.0143526136 -0.0154756040 -0.0403367324 0.0362809747 0.0247843994 -0.0055981600 0.0234111453 0.0177313193 -0.0558677786 0.0246387452 0.1366681332 -0.0975391933 0.2156765036 0.0323803595 -0.0702103330 0.0787153660 0.0559715574 -0.0361709973 0.0954320076 0.0361063871 -0.0630732200 0.0000236084 -0.0356008229 -0.0457931821 0.0030335153 -0.0396845817 -0.0193145962 0.0858616978 -0.0480601892 -0.0470640326 0.0639658796 -0.0209461342 -0.0386701607 0.0003695844 -0.1416819142 -0.0473545384 0.1911046304 -0.0306787069 -0.0155104493 -0.0339134453 0.0431175868 -0.0240046122 -0.0592116738 -0.0046493365 0.0346342513 0.0206433004 -0.0409110801 0.0335799370 0.0030841234 0.0532058849 0.0053784427 0.0032107008 -0.0147419384 0.0181613491 -0.0241713759 0.0110797523 0.0140587690 -0.0017367531 0.0006731747 -0.0013734893 0.0088100305 0.0027395612 -0.0138602066 0.0038653053 -0.0123724069 0.0101935300 0.0135899231 -0.0083234634 -0.0169607275 -0.0042404341 -0.0160901556 -0.0058860536 -0.0107117819 0.0156384657 0.0023793620 0.0146082245 -0.0348222451 0.0247270080 -0.0013194782 -0.0099519886 -0.0151863982 -0.0143978982 -0.0318787793 0.0093564137 -0.0181861030 -0.0141393000 0.0000712340 -0.0085297864 -0.0102728109 -0.0072862652 0.0017922259 -0.0124297385 -0.0105279394 0.0139805766 0.0030495830 0.0019864607 -0.0012498260 -0.0014188581 -0.0004618509 0.0007673810 0.0049209812 0.0015189285 -0.0011462902 0.0023009393 0.0026469453 0.0001977777 -0.0000576273 -0.0006982501 0.0017467612 0.0001808104 -0.0000170904 -0.0015047058 0.0055015900 0.0017970184 -0.0027678294 0.0001538875 0.0050507469 0.0001213408 -0.0019132813 -0.0001183817 0.0048680074 -0.0028148172 -0.0001132149 -0.0050099077 -0.0034408919 0.0002660515 0.0006169476 0.0134453791 0.0128039051 -0.0205612917 0.0371286467 0.0192675097 -0.0283551331 0.0480523156 0.0634996643 -0.0491398075 -0.0007564671 -0.0009396461 0.0033047263 0.0016111618 0.0022534189 0.0004482047 0.0006212063 0.0039755870 -0.0017877952 0.0005764742 -0.0014646320 -0.0000166241 0.0001507654 -0.0016747254 0.0026836090 -0.0026939942 -0.0015113066 -0.0012087875 0.0021682742 -0.0012685603 -0.0017555062 0.0033218943 0.0011825216 -0.0002423270 0.0023170423 -0.0007897911 -0.0023329588 0.0004250913 0.0017578259 0.0015791931 -0.0030526343 -0.0015852973 0.0019229817 0.0009449465 -0.0059992056 0.0033764789 -0.0046739629 -0.0022341500 -0.0018885584 0.0001636753 0.0032682263 0.0003203039 -0.0040951634 -0.0014269581 -0.0080060082 0.0017459885 -0.0011165421 -0.0021549654 0.0026098654 -0.0016333427 -0.0027531256 0.0013420360 -0.0009486035 -0.0016118687 0.0011274621 -0.0009933848 -0.0015620922 0.0006651236 -0.0010947901 -0.0013644444 0.0029439464 -0.0016145367 -0.0040556647 -0.0308218013 0.0608579187 -0.0536807315 -0.0215565472 0.0307844947 -0.0187500488 0.0260713886 -0.0431480829 0.0747899281 0.0049212139 0.0401158707 0.0179236748 0.0596735305 -0.0136337373 0.0577199172 0.0223246289 0.0380606954 -0.0204971055 -0.0246913373 -0.0199027257 -0.0036613114 0.0286689497 -0.1217627584 0.1426253215 -0.0222237431 0.0054747902 -0.0572627726 0.1331212703 -0.0827457417 0.1166421367 0.0825182239 -0.0159478183 -0.0180769869 0.0204655439 0.0204548935 -0.0064054266 -0.0270313984 -0.0244210560 0.0694150356 0.0199632994 0.0579882757 0.0130055121 -0.0589549859 -0.0017985417 0.0611699610 -0.0161630118 0.0428219792 -0.0098470758 -0.0067997769 -0.0575696742 0.0150674084 -0.0673754444 -0.1278529526 0.1409180998 0.0206296064 -0.0009444588 -0.0629466223 -0.1603249314 -0.0723978021 0.1238620053 -0.0986135488 -0.0111057124 -0.0006956695 0.0474672909 0.0005981029 -0.0448309380 -0.0837628541 -0.0299749416 -0.0042341261 -0.0537424718 0.0123692959 -0.0419372990 0.0746255833 -0.0576895095 -0.0088559074 -0.1068970756 0.0319344698 -0.1520487879 -0.0233468955 0.0204466773 -0.0793961605 -0.0205867064 0.0220264810 0.0336886803 -0.0201707065 0.0159704857 0.0393601109 0.1082890907 -0.0033346262 0.2630925430 0.0682372564 -0.0200982265 0.2258162261 0.0681514990 0.0165466634 0.0691446957 -0.0364918847 0.0138616668 -0.0739268132 0.1953964895 -0.0042221402 0.2573107278 -0.0130001425 -0.0220900031 -0.0566691908 0.0364333847 0.0138346673 -0.0756785744 0.0821641064 0.0036358053 -0.1229286477 -0.0454669598 0.0232721039 0.0513138640 0.0222938758 -0.0029411742 -0.0515930018 -0.1572931082 0.0374821686 0.2091654329 -0.0132619662 -0.0170829116 -0.0154808720 0.0092277329 0.0118848217 0.0308817198 0.0141092838 0.0000946950 0.0136893786 -0.0928729237 0.0204972573 0.2267807800 -0.0546587021 -0.0083460965 0.1509769417 0.0012734304 0.0017367667 0.0024040768 0.0011994189 -0.0002781667 -0.0019732068 0.0027191208 0.0040123796 0.0039365559 0.0035938715 0.0046950998 0.0017664395 -0.0038090325 -0.0000615053 0.0000222708 -0.0110684421 0.0013263545 0.0028274682 -0.0006712225 -0.0001918321 -0.0016209499 -0.0039065797 0.0026601087 -0.0060630407 -0.0266154536 -0.0123482954 -0.0830336011 0.0061522886 0.0191541663 -0.1506114225 0.0183093931 0.0145068040 -0.0733097734 -0.0845569379 0.0119629721 -0.0368144469 -0.0559886851 -0.0129358816 -0.0206875593 -0.0703990187 0.0150889407 0.0057379625 -0.1053366739 0.0117281870 0.0532974715 0.0062962607 -0.0471112431 0.0942691877 -0.0311357727 0.0050447265 0.0957234931 -0.0313595402 -0.0512822022 0.2074829819 -0.0063342518 -0.0414712829 -0.0966837128 0.0175073544 0.0227172669 0.0768946558 0.0505204814 -0.0010398698 0.0153170404 -0.0363765346 -0.0364891778 -0.0171074011 -0.0030706875 0.0536630398 0.0071868633 -0.0075622062 0.0247066462 -0.0124285351 -0.0089742158 0.0066642280 -0.0118416061 -0.0075860810 -0.0054585359 -0.0034514018 0.0020024957 -0.0000694174 -0.0003196377 -0.0057494194 -0.0048116089 0.0058694179 -0.0026940888 -0.0135886854 -0.0027696197 0.0002313305 -0.0021676882 -0.0094796931 0.0087899130 0.0013492810 0.0039626661 -0.0152061156 -0.0028176684 -0.0018885740 -0.0049783916 -0.0122022750 0.0024633690 -0.0052576467 0.0034043123 -0.0118163529 -0.0042378426 0.0009288705 0.0019024906 -0.0043036442 -0.0068594466 0.0083928271 -0.0030891179 -0.0124481549 0.0148627707 -0.0061593995 0.0141345809 0.0005690729 -0.0063010227 0.0040377372 -0.0048179046 -0.0003030769 0.0015519020 0.0012320981 0.0034902378 0.0057759756 -0.0040955385 0.0031118028 -0.0060886486 -0.0009477020 -0.0010039459 -0.0063286345 0.0023358470 0.0110990730 -0.0109330081 0.0000617951 0.0153267110 -0.0086263236 -0.0008402500 0.0108314865 -0.0208559986 0.0084543310 0.0084860616 -0.0190554305 0.0055940791 -0.0051301171 0.0066480610 -0.0054330591 0.0042405532 0.0098222564 -0.0060429180 0.0089292721 0.0174023514 -0.0075577713 0.0537404183 0.0546887636 -0.0534043035 -0.0008799166 -0.0010062952 0.0031583654 0.0014480249 0.0011109181 0.0006485863 0.0013935262 0.0025523472 -0.0011069286 -0.0000689070 -0.0008908292 -0.0001686278 -0.0003460081 0.0000666482 0.0013723779 -0.0007816228 -0.0010304441 -0.0003153097 0.0005451246 -0.0004110216 -0.0002223116 0.0021734881 0.0005525013 -0.0005545374 0.0021103122 -0.0007829672 -0.0021412321 0.0011059234 -0.0001344230 0.0031407984 -0.0006662283 0.0000170953 -0.0002165972 0.0006570038 -0.0028548123 0.0008123354 -0.0001919795 -0.0017556813 0.0010655740 -0.0010661056 0.0026184652 0.0008665524 -0.0067820643 0.0005825629 -0.0033441815 -0.0000314076 -0.0001251996 -0.0009191925 0.0012420664 -0.0006972711 -0.0019359771 -0.0011018292 0.0000705190 -0.0000043630 0.0013702154 -0.0008230505 -0.0014158797 0.0010632236 -0.0010812496 -0.0015424933 0.0023241736 -0.0010996639 -0.0028097037 0.0261786286 -0.0262136279 0.0442548453 0.0126212967 0.0186756155 0.0290934023 0.0051159626 0.0272069216 -0.0127066993 0.0174963638 -0.0403034342 0.0124345344 -0.0076558244 0.0150108690 -0.0071679261 0.0067180057 0.0216478292 0.0285458046 0.0035557500 0.0854684798 0.0047405947 -0.0022921312 0.0888791259 -0.0624134451 0.0011099528 -0.0210548093 -0.0052816418 -0.0525580122 0.0678007974 -0.0464956625 -0.0393185688 0.0795372214 0.0110111763 -0.0053555919 -0.0110223039 -0.0383117172 -0.0211463634 -0.0392833045 -0.0069209619 0.0433087428 0.0575766731 -0.0381098116 -0.0156275576 -0.0366505097 -0.0067848522 0.0082821255 -0.0238092007 -0.0336054829 -0.0777133553 -0.1094988228 0.0062102191 -0.0956547251 -0.1509801611 0.0537595864 0.0126048973 0.0351506594 0.0277931373 -0.0943111059 -0.1392283081 0.0468083024 -0.0719467957 -0.1158198050 0.0113790444 0.0024413592 0.0070060476 -0.0068502826 -0.0182781289 0.0023789022 0.0015860730 0.0299126836 -0.0240485509 0.0264802967 -0.0460798101 0.0186796572 0.0098138897 0.1123794519 -0.0038328274 0.1217993841 -0.0019465150 0.0226343403 0.0382098278 0.0226642193 -0.0196797615 -0.0162187716 0.0074993986 -0.0396591574 -0.0539301559 -0.1133798425 0.0088651136 -0.1803466131 -0.0758860786 -0.0068549930 -0.2273108929 -0.0653080061 -0.0012215225 -0.0794301958 0.0247912887 -0.0373808684 0.0834792601 -0.1260430687 0.0067556532 -0.2332825137 0.0337956636 -0.0183284830 0.1116202679 -0.0158900284 -0.0169148929 -0.0469465817 0.1424540500 -0.0327606934 -0.1630346735 -0.0836919736 0.0327452031 0.1030987597 0.0468295949 0.0348124300 -0.1141107101 -0.1574378602 0.0419684914 0.2813041719 0.0541697201 0.0009643670 -0.1678720219 0.0450357674 0.0164186025 0.0176746365 0.0249455780 0.0413145125 0.0802921403 -0.1250964266 0.0313154449 0.2295830458 -0.0913914896 0.0254743203 0.3136053377 0.0014386761 0.0019965557 0.0020968795 0.0005266203 0.0006575581 -0.0030752580 0.0041456612 0.0048540156 0.0034692053 0.0033749115 0.0045733728 0.0015037634 -0.0035674869 -0.0010390861 0.0011797417 -0.0087597475 -0.0065602401 -0.0032551065 -0.0016652257 0.0038564124 -0.0028966998 -0.0014053857 0.0002936803 0.0031870165 0.0013756947 0.0089589599 0.0105881365 0.0550481930 -0.0293799782 0.2028057024 0.0109891378 -0.0156315632 0.0694302406 0.0278514853 0.0072558628 0.0266319638 -0.0002363941 0.0114447862 -0.0491510028 0.0182676705 0.0224098176 -0.0602818943 -0.0033866607 0.0180593351 0.0015054586 0.0239770989 0.0042533686 0.0383474734 0.0361512763 0.0436617452 -0.0242531889 0.0229375700 -0.0026043994 0.1378057010 0.0107946811 -0.0449387915 0.0140717727 0.0210514029 0.0160409097 -0.0220049639 -0.0328110172 -0.0244417073 0.0284230679 0.0095817659 0.0229328697 0.0019738842 0.0026088336 -0.0092991448 -0.0245686143 0.0514605731 -0.0761835987 -0.0002299315 0.0500565691 0.0526604484 0.0122308570 0.0167370690 0.0394970450 0.0206965619 -0.0352688420 -0.0126396386 0.0077139935 0.0079984951 0.0291645051 0.0437781661 -0.0040324724 -0.0030107808 -0.0053938783 -0.0277438478 -0.0358405092 0.0192711672 -0.0289141482 0.0160975145 0.0276260809 0.0397426558 0.0350777807 0.0740300591 0.0224708254 -0.0213036004 -0.0523471835 -0.0136824930 -0.0563544542 0.0248629233 0.0259578639 -0.0092128312 -0.0125593690 0.0263432767 0.0703349733 -0.0546154923 0.0245681256 0.0885704313 -0.0832349961 0.0524227924 -0.1048257836 0.0097249367 0.0494442325 -0.0501424431 0.0329845663 0.0067231724 -0.0215079679 0.0041120974 -0.0171624514 -0.0270950664 0.0124961472 -0.0336766049 0.0445567304 -0.0050681497 -0.0173995453 0.0537011810 -0.0082668787 -0.0679666977 0.0642959799 0.0044488182 -0.0783139305 0.0498574080 -0.0118605443 -0.0981390710 0.1548279111 -0.0586722141 -0.0994808903 0.1678080810 -0.0339395452 0.0642252245 -0.0780322558 0.0396832126 0.0159379485 -0.0196946303 -0.0401568723 0.0063243102 0.0389719313 -0.0632298966 0.0422777768 0.0732822935 0.0144485034 0.0044966465 0.0083641003 -0.0394873882 -0.0070944996 -0.0030337267 -0.0046904876 -0.0158060682 -0.0220162195 0.0225981353 0.0032781013 0.0126323082 0.0006113020 -0.0015622371 0.0051824282 -0.0085995138 0.0089718109 -0.0008427422 0.0028701510 -0.0049532661 0.0053090588 0.0052946472 -0.0097320328 0.0016133910 0.0087252674 -0.0175500535 0.0065561168 0.0169868567 0.0016261346 0.0094832771 -0.0069627137 0.0015745044 0.0050532124 -0.0029750701 -0.0012976485 0.0088932657 -0.0109117855 0.0112038385 -0.0016679256 0.0066666309 -0.0009886153 0.0001932525 0.0027450657 0.0090088484 -0.0007815647 0.0078787050 -0.0179457623 0.0064908020 0.0140325440 -0.0031915118 -0.0031407375 0.0012310845 -0.0031800449 -0.0027817131 0.0006113849 -0.0167847110 0.0054787379 0.0111961778 -0.0160878183 0.0087629329 0.0160896545 -0.0153077845 0.0037212299 0.0129236843 -0.0084325516 0.0085200846 -0.0122326459 -0.0030961759 -0.0056891551 -0.0100215056 -0.0024002317 -0.0090387620 -0.0013443626 -0.0061757078 0.0136459484 -0.0081327922 0.0009011439 -0.0044471200 -0.0029738070 -0.0005097246 -0.0088479137 -0.0070871503 0.0063772347 -0.0256460004 0.0000306419 0.0029761899 -0.0306512102 0.0137013166 -0.0010773817 0.0082015556 0.0058925413 0.0113093613 -0.0222875264 0.0081428398 0.0145909241 -0.0305461919 0.0015641757 -0.0656998873 0.0122739506 -0.0000166443 -0.0525592269 -0.0266974819 -0.1276361536 0.0437462273 0.0326610721 -0.1254528559 0.0344883217 -0.0706425132 -0.1159653108 0.0225403751 -0.0517224653 0.0233953912 -0.2105903906 -0.0144108767 0.0739810887 -0.2102738107 -0.0912839088 -0.1563716597 0.0105481674 0.0625191272 0.1388103957 0.0591039882 -0.2255273092 -0.1121423055 0.0241886019 -0.1764930048 0.1406069304 -0.0059300387 -0.0033770887 0.0056839458 0.0107942175 0.0009359612 0.0005088086 0.1500119601 -0.0754226583 0.1076233862 -0.1607419158 0.1012141442 0.0454675829 -0.0671656122 0.0022729194 -0.0958879305 0.0166699815 -0.0128490145 0.0329727488 -0.0247739526 0.0108387431 -0.0503015155 0.0485522089 0.0006736793 0.0753095490 0.0276398643 -0.0003739412 0.0141983387 0.1411590819 -0.0202048963 0.2433848377 0.0396182431 -0.0167886960 0.0704712847 -0.0444254171 0.0134254299 -0.0928473986 0.0596411324 -0.0192778077 0.1220053783 -0.1086367901 0.0307557773 -0.1945183253 -0.0186189194 -0.0161571465 0.0324899231 0.0178163335 -0.0235149334 -0.0188378899 -0.0161725282 -0.0231847546 0.0157694670 0.0011018206 0.0062967235 -0.0477709115 0.0109522664 -0.0254920486 0.0119853879 0.0516751739 0.0208622815 -0.1065627983 0.0001371064 0.0049301317 -0.0427883408 -0.0467224540 0.0132980852 0.0279257621 -0.0126349135 0.0056726863 -0.0679745252 -0.0770323003 0.0116123391 0.0852382720 -0.0207696439 -0.0254647651 -0.0349276879 -0.0101970009 -0.0162626692 0.0132479461 -0.0454289776 -0.0567424695 -0.0529753955 -0.0337159516 -0.0484365531 -0.0244061357 0.0342657391 0.0113647197 -0.0044135312 0.0930260213 0.0322790555 0.0041578667 0.0000287750 -0.0174079114 0.0312468707 0.0429279518 0.0044358916 0.0253119415 -0.0239361751 0.0221794729 -0.0509882080 0.0197844108 0.0163514639 0.0496367988 0.0081416610 0.0205042361 -0.0019068803 -0.0121612532 0.0061071800 0.0224242823 -0.0286143705 0.0167862906 -0.0148125379 0.0490154546 0.0088080321 -0.0235124589 0.0082765011 0.0005153984 0.0424114416 -0.0288162918 0.0237983356 0.0368622588 0.0152987343 0.0049957357 -0.0273482315 -0.0776624126 0.0198988371 0.1557882699 0.0121393186 0.0560244168 0.0118184409 -0.0086243362 0.0108315653 0.0272000471 0.0103790725 -0.0222506601 -0.0063622529 0.0152629619 -0.0212732137 -0.0083379393 -0.0419458115 -0.0017307077 0.0193652080 0.0616188095 -0.1278186638 0.0479724629 0.0552730449 0.0766238302 0.0026450318 0.0256143868 0.0526674619 0.0181724296 -0.0412159665 -0.0153110260 0.0265139114 0.0098935373 0.0373118989 0.0559823577 0.0078820802 0.0026933547 -0.0066712483 -0.0351458286 -0.0401155491 0.0267596695 -0.0400159944 0.0070425419 0.0430865299 0.0433461369 0.0702663026 0.0963835968 0.0365192587 -0.0164528093 -0.0682120930 -0.0356572350 -0.0634146203 0.0209195475 0.0276391794 -0.0078975378 -0.0053686259 0.0251596272 0.1236960993 -0.0778656352 0.0142787087 0.1632906849 -0.1197403744 0.1018361998 -0.1841046127 0.0304371325 0.0873589501 -0.1016795989 0.0460287162 0.0158500087 -0.0425605210 0.0106709764 -0.0155298771 -0.0371803615 0.0130967232 -0.0611818379 0.0823149147 -0.0170933727 -0.0453647039 0.0940581129 -0.0154627725 -0.1102170567 0.1110542672 -0.0040273325 -0.1132984799 0.0931631541 -0.0248690128 -0.1837696544 0.2797765249 -0.0970593605 -0.1965287759 0.3082623747 -0.0605741333 0.1221572300 -0.1547224518 0.0587278247 0.0133588420 -0.0356261530 -0.0720953164 -0.0284752263 0.0633837653 -0.1017651598 -0.0410684158 -0.0612668849 0.0067558507 0.0102903056 0.0166430791 -0.0640954524 -0.0148504313 -0.0111403837 -0.0089153871 -0.0218233586 -0.0406997660 0.0309645557 0.0047394115 0.0208610394 0.0007996952 -0.0012087876 0.0089761733 -0.0182815200 0.0175906337 0.0048946245 0.0055311383 -0.0120729566 0.0110627900 0.0114149463 -0.0233396616 -0.0027928796 0.0122265308 -0.0310587339 0.0113729653 0.0295055654 0.0024909225 0.0142263534 -0.0164273245 0.0010476556 0.0091780085 -0.0110672667 0.0004567795 0.0167851913 -0.0258118759 0.0180387748 0.0016259593 0.0075094760 -0.0003699484 -0.0093562474 0.0002846075 0.0349440809 -0.0000307455 0.0254924943 -0.0279591682 0.0117976882 0.0260328898 -0.0125314827 0.0012791814 0.0125612309 -0.0041490789 -0.0016286776 0.0043282251 -0.0257395014 0.0105128686 0.0178592583 -0.0234852905 0.0159376922 0.0252358779 -0.0303323996 0.0105957487 0.0299603481 0.0106401814 -0.0112722660 0.0208538009 0.0104656127 -0.0021743371 0.0146986627 -0.0034182912 0.0144080699 -0.0222769823 0.0014984493 -0.0136449047 -0.0067822100 -0.0132036769 0.0071021649 -0.0195616442 0.0027763375 -0.0060257361 0.0169926013 0.0163057979 0.0249018876 0.0086169985 -0.0004201710 0.0419218545 -0.0495869419 0.0024788407 -0.0029796625 0.0132761984 -0.0444394527 0.0347100005 -0.0437987513 -0.0228648150 0.0162860123 0.0168910984 0.0298871546 -0.0106283139 0.0032926539 0.0364568488 0.0260475119 0.0565562049 -0.0387786243 -0.0375353353 0.0731683075 -0.0102064849 0.0503054006 0.0506067795 -0.0201830491 0.0234213129 -0.0069683245 0.1266638356 0.0404613646 -0.0494275642 0.1499954883 0.1042475743 0.0482717108 -0.0078304226 -0.0405324426 -0.0687275132 0.0124124101 0.1755354069 0.0246669892 0.0070054894 0.1220265976 -0.0851261070 -0.0137042544 -0.0003964458 0.0104345987 0.0153505459 0.0071376832 0.0026729116 -0.0737505086 0.0401764853 -0.0556451540 0.0847699913 -0.0491671858 -0.0238577808 0.0234675263 -0.0025749024 0.0122770608 -0.0199387353 0.0055280875 -0.0067803130 0.0236321679 -0.0102097329 0.0003459439 0.0097972347 -0.0149318917 -0.0327507234 0.0069792867 -0.0067862758 -0.0087170432 -0.0043650898 -0.0029458083 -0.0725120459 -0.0226105565 -0.0100780844 -0.0155755694 0.0081532830 -0.0125658871 0.0238542929 -0.0175276806 -0.0112248122 -0.0249455387 0.0223064507 0.0053667819 0.0607864311 0.0158899377 0.0018432370 0.0137660482 0.0160371794 0.0083341790 -0.0642604833 -0.0095672653 -0.0130707884 0.0428307909 0.0317958924 -0.0180050665 -0.0331483853 -0.0475199090 -0.0091300420 0.0660181498 0.0660647095 -0.0003304228 -0.0629435676 -0.0085131747 -0.0028411700 -0.0288114369 -0.0408593159 -0.0093635443 0.0171400360 -0.0213022658 -0.0021121317 0.0292144367 -0.0913216864 0.0094910682 0.0933147485 -0.0334308797 -0.0384604099 -0.0528736475 -0.0157376644 -0.0209058750 0.0317224387 -0.0776716120 -0.0893593322 -0.0800916877 -0.0589524498 -0.0776859168 -0.0396509751 0.0610153134 0.0222286765 -0.0094867073 0.1555542249 0.0527183390 0.0012960634 0.0118172777 -0.0254959006 0.0452831142 0.0702188835 0.0061335891 0.0394345899 -0.0502421313 0.0797915031 -0.0712544283 0.0490991941 0.0135537689 0.3360093893 0.0001456076 0.0314378997 0.0894185243 0.0176122489 0.0177838183 0.0400014585 -0.0392655458 0.0533670677 -0.0872407865 0.0421514981 0.0110105190 -0.0776101129 -0.0004459581 0.0152493344 0.0418404653 -0.0371210286 0.0044636668 0.0698918132 0.0233816589 0.0094361367 -0.0499124679 -0.1185101689 -0.0024752001 0.2733483154 -0.0296529523 0.0687527802 0.0310553355 -0.0111252901 0.0062653340 0.0445872520 0.0120066808 -0.0705053877 0.0334669750 0.0434765501 -0.0104011571 -0.0464299180 -0.0344813929 0.0233937072 -0.0384604397 -0.0305120018 0.0552109745 -0.0146012693 -0.0344754069 -0.0516469055 0.0093622716 -0.0095943540 -0.0241252723 -0.0090286603 0.0234324610 0.0113369504 -0.0173300193 0.0039671540 -0.0205598371 -0.0438014612 0.0012650453 0.0149586539 0.0104045244 0.0250231574 0.0278505751 -0.0033945424 0.0143154366 -0.0074093655 -0.0327952751 -0.0057265380 -0.0439570009 -0.0600138234 -0.0141342642 0.0254026943 0.0437352294 0.0320508083 0.0366368258 0.0034610094 -0.0093090878 -0.0021022132 0.0040965641 -0.0103501966 -0.0620030902 0.0331779512 -0.0059879863 -0.0771241367 0.0487365710 -0.0497629615 0.0876779483 -0.0178420429 -0.0439693369 0.0511324172 -0.0182838437 -0.0072581835 0.0235069136 -0.0034016484 0.0076461036 0.0156112122 -0.0074012710 0.0270387667 -0.0429449997 0.0081689344 0.0231090822 -0.0465471014 0.0114878185 0.0503896936 -0.0480269732 0.0053006941 0.0555186929 -0.0395786554 0.0143741749 0.0858675175 -0.1359411547 0.0436092335 0.0960371258 -0.1529149000 0.0315048100 -0.0605090409 0.0817915442 -0.0256925807 -0.0171785333 0.0085639339 0.0547529085 -0.0191899401 -0.0332110976 0.0722779546 -0.0250074572 -0.0350760182 0.0129035314 -0.0004357926 -0.0035000429 0.0293374088 0.0016685564 -0.0031689851 0.0026119730 0.0145684734 0.0100205277 -0.0186398258 -0.0020493890 -0.0062542962 -0.0005357893 0.0001454658 -0.0013949403 0.0034805373 -0.0025954001 0.0009100651 0.0000758736 0.0006747983 -0.0021058945 -0.0010283034 -0.0011160536 -0.0064154945 -0.0080330686 0.0103141733 -0.0042616532 -0.0096998337 -0.0004972469 -0.0083748060 0.0058198532 0.0002560198 -0.0012258868 -0.0046920203 0.0004290472 -0.0055586025 0.0049526370 -0.0023688527 0.0030509197 -0.0030880496 0.0037593557 0.0006015732 0.0003949967 -0.0044741832 0.0015739153 -0.0026130783 0.0104222074 -0.0026910265 -0.0084708868 -0.0002839491 0.0047331128 0.0010221708 -0.0020085964 0.0051140429 0.0031304980 0.0138263602 -0.0024215471 -0.0063924747 0.0143541353 -0.0049712298 -0.0118916480 0.0055637016 0.0018414989 0.0006721279 -0.0086705848 0.0384419831 0.0145616877 0.0487271084 -0.0261641186 0.0142563359 0.0068285652 -0.0046131788 -0.0980047634 -0.0285518365 0.0271359409 -0.0865769610 -0.0447877245 -0.0180223080 -0.0843240685 -0.0061764054 -0.0467637956 0.0337523071 0.1431899409 -0.0633817707 0.0653599968 0.0810519975 -0.0482024222 -0.1240765898 0.0125679417 0.0309299803 0.0921036553 -0.0918700682 -0.0891886102 -0.0815063612 -0.0199807492 -0.1185446164 0.1164860757 0.0131908377 -0.0063992810 0.0066191149 0.0221381856 0.0140842440 0.0136790211 -0.0218873421 -0.0258739088 0.0298038715 0.0015679620 0.0254880893 0.0122620195 -0.0117804639 0.0085272026 0.0038829352 0.0556839111 0.0323982331 -0.0180038039 0.0768093375 0.0642272188 -0.0017213780 -0.0064502789 -0.0205267925 -0.0238724896 0.0287227498 0.0896160562 -0.0093196315 0.0113932512 0.0591282319 -0.0313930021 -0.0991056165 -0.0226808398 0.0762905475 0.1192769355 0.0312298391 0.0214936911 -0.0265853725 0.0167616754 -0.0210371241 0.0312694828 -0.0163451310 -0.0096616058 -0.0478670280 -0.0131826993 -0.0732240934 0.0031065421 -0.0236446718 0.0378439519 0.0033597114 0.0019876659 -0.0694523976 0.0807010310 -0.0114104239 0.0455825810 0.0399867035 -0.0069842360 -0.0482221485 0.1577117575 -0.0244074445 0.1774286582 0.0187225777 -0.0422818561 0.0529832055 -0.0219974973 0.0049775293 -0.0841454148 0.0184168672 -0.0406444810 0.0831527798 -0.0892011576 0.0553637595 -0.1689124580 -0.0053438237 -0.0010242184 0.0449310109 0.0395012794 -0.0044508268 -0.0944404432 -0.0268360375 -0.0158224059 0.0707762670 0.0547646715 -0.0173817924 -0.0807437223 -0.0502649402 -0.0131446552 0.0955025253 0.1331579149 -0.0039547213 -0.1833361227 0.0117790570 -0.0041907336 -0.0666624393 -0.0680550821 -0.0014725573 0.0658275649 -0.0088283573 -0.0028497207 -0.0175596163 -0.1599290555 0.0199043839 0.2168263442 0.0168679297 0.0207144171 0.0305818629 0.0093891557 0.0167704664 0.0013475741 0.0317096489 0.0421837564 0.0439084949 0.0220658011 0.0349252575 0.0205051812 -0.0194015348 -0.0069152453 0.0027093158 -0.0614399024 -0.0282607077 -0.0096152212 0.0091694322 0.0202229143 -0.0289142808 -0.0275673398 -0.0047754987 -0.0165037995 0.0005160349 -0.0011408370 -0.0002626265 0.0054251076 -0.0000439236 0.0040617340 0.0033708711 0.0005029089 0.0008728080 -0.0021693269 0.0000183550 0.0024707615 -0.0025541300 -0.0000815312 0.0008212035 -0.0044353014 -0.0000850081 0.0054510155 -0.0028423096 -0.0000873092 0.0020275550 0.0033397041 -0.0014768447 -0.0034754248 0.0006537843 0.0002182535 -0.0003398694 0.0080310928 -0.0012976789 -0.0121709347 0.0000589470 -0.0036305998 -0.0027420412 -0.0004234061 0.0037889625 -0.0009382146 0.0009421838 0.0005069514 -0.0017158169 -0.0010151727 -0.0029646431 0.0010685970 -0.0024620386 0.0021779582 0.0014189423 0.0193019340 -0.0200741060 -0.0160181525 -0.0904565399 0.0788271556 -0.0613190110 -0.0446232752 0.0132788919 -0.0162245437 -0.0158770152 0.0152109889 -0.0255334095 0.0061517730 -0.0220898944 0.0223773539 0.0184049166 -0.0578996129 0.0135096326 -0.0197423487 0.0102572872 -0.0319202172 0.0443309052 -0.0097301480 0.0174497909 -0.0269046715 -0.0193018697 -0.0057766584 0.0447568795 -0.0806301408 0.0398367791 -0.0349319739 0.0400562577 -0.0346746632 0.0069944324 -0.0061952266 0.0004035559 0.0232716533 0.0187390883 0.0126412930 0.0158007102 0.0475400209 -0.0160358698 -0.0319465689 0.0352250373 0.0023359180 -0.0150702930 0.0280711337 -0.0172820695 -0.0229416862 0.0007191192 -0.0008337952 -0.0110975986 0.0044472453 -0.0001848356 0.0204801173 -0.0156884369 0.0010240572 0.0119071969 -0.0224013471 0.0047466215 -0.0018685957 -0.0267836661 0.0045503298 -0.0035356312 -0.0312679301 -0.0118061030 0.0536683591 -0.0631034105 0.0117619161 0.0564782796 -0.0654769654 0.0302389344 -0.0243927269 0.0404847735 -0.0200775805 0.0051593626 0.0361403321 0.0033922799 0.0395297028 0.0107258937 0.0033682471 0.0027937164 0.0037274944 -0.0001999370 0.0732468187 0.0714263400 0.0141600264 -0.1087384714 -0.1698164839 -0.0163927469 0.0918815570 -0.1706134711 -0.0718512836 0.0217918303 0.0814597606 0.0076935916 -0.0046960135 0.0647425438 -0.0955908910 0.1152473767 0.0234991497 0.0494931061 -0.0714901964 0.0539135668 0.0689536911 -0.2354904365 -0.1710550157 -0.0651801450 -0.0613611664 0.0216267274 0.0638428900 -0.0173932734 -0.0246191809 -0.0703564227 -0.0112510814 0.0722449833 -0.2329764732 -0.0036593281 -0.0052691210 -0.0601826630 0.0552520929 -0.0331189539 0.0174826525 0.1165378050 -0.0259284967 0.0344047108 0.2209924616 -0.0080031447 0.0834665485 -0.0969455065 0.0586494680 0.0861838113 -0.0725949955 0.0454225818 0.0700767329 -0.0680967137 0.0474480512 0.0658214122 0.0762039752 0.0534740235 0.0079180054 0.1078282424 0.0516239959 -0.0302029608 -0.1602607479 0.1521519113 0.3004225691 0.0015506476 -0.0035387142 -0.0004164762 -0.0033383725 0.0019531736 -0.0004429826 0.0000032440 -0.0006741344 0.0082381967 0.0037653784 -0.0046080145 0.0081643616 0.0039057020 0.0033916050 0.0056442076 0.0026808075 0.0030994761 -0.0015431290 -0.0121286454 0.0092209801 -0.0064809748 -0.0097932216 0.0106693230 0.0061486750 -0.0018737520 -0.0033960280 -0.0076485725 0.0052049708 0.0143147010 0.0024428958 0.0030793212 0.0102628424 -0.0088811144 -0.0009963092 0.0003139295 0.0010739802 -0.0027119589 -0.0035853485 -0.0013837264 0.0004751836 0.0009841541 -0.0028599749 0.0003165361 -0.0005221025 -0.0027016018 -0.0007121675 -0.0009812893 0.0019670254 -0.0036140620 0.0006960829 0.0023345596 -0.0049556652 -0.0036988180 -0.0024247682 0.0003501508 0.0020454380 0.0022127125 0.0021140106 -0.0034194836 -0.0033629877 -0.0018754137 -0.0051256916 0.0052839226 0.0078351047 0.0019110437 -0.0060683475 -0.0106047277 -0.0028568086 -0.0015711117 0.0014556615 -0.0027275265 0.0021752016 -0.0030449108 0.0020377444 0.0008798478 0.0003764656 0.0013998402 -0.0038100777 -0.0015725140 0.0015234828 0.0006463103 0.0008758157 -0.0006335330 -0.0012331658 0.0017651832 -0.0020245096 0.0001046723 0.0007007591 -0.0004885810 0.0032699579 0.0048799985 -0.0011834961 0.0034300873 -0.0001727064 -0.0005069618 0.0027829239 -0.0029037136 -0.0010783003 -0.0007246713 0.0037021928 -0.0014037080 0.0034056080 -0.0039771608 0.0006983836 -0.0014036980 0.0025118230 -0.0007741937 -0.0069266598 -0.0019505085 -0.0009687157 0.0062266960 0.0027611049 0.0000883278 -0.0069097309 -0.0060734961 0.0017871521 0.0075335941 0.0026036199 0.0002296238 -0.0037753636 -0.0154219944 0.0020406650 0.0221109182 -0.0026583176 0.0006859089 0.0070986253 0.0059751653 0.0004042535 -0.0081738478 -0.0044430734 0.0008396202 0.0072475682 0.0135525644 -0.0016401669 -0.0204217378 0.0359406263 0.0687112123 0.1233179582 0.0439672086 0.1421491890 0.2809640379 -0.0540341314 0.0509534941 0.1502133906 -0.0817680924 0.0039434209 0.0465922381 0.1465330075 0.0515137853 -0.0598295228 0.1340718851 -0.0077466847 -0.1151317089 0.2629519410 0.0795814217 -0.1408316663 0.0479263958 -0.0379497344 -0.0804167284 -0.0165873878 -0.0062155456 -0.0658822238 0.1461809997 -0.0038169562 0.1563892256 0.0693758974 0.0177103712 0.0184300178 -0.0365566996 0.0103794547 0.0341100438 -0.0692106342 0.0172409859 -0.0535293489 0.0219924330 0.0098927332 -0.0312498949 -0.0143241933 0.0068528054 0.0419236489 -0.0114911420 0.0168037264 0.0144534093 0.0347443168 0.0167507026 -0.0761811557 -0.0535434589 0.0129412458 0.1260139799 -0.0030429388 0.0075826559 0.0440787767 0.0447639066 0.0905533193 0.0430048502 -0.0159979001 -0.0441058895 0.0058479250 0.0426722966 -0.0018289866 -0.0109324744 -0.0171471961 0.0128367178 -0.0577903788 -0.1085223708 -0.0793148686 0.1958159263 -0.1645955201 -0.0955594158 -0.0193005480 -0.0166670131 -0.0363893877 -0.0593235409 0.0600201379 0.0496872715 0.0012932830 0.0323810978 -0.0600189246 -0.1331797162 0.0771185295 0.0823721584 0.0514908332 0.0626270041 0.1191389864 0.0103766390 0.0306658762 -0.0821887596 -0.0641485970 -0.0065364695 -0.0371239279 -0.1611920065 0.0426712436 0.1047733318 0.1528756731 0.0293772585 0.1491492602 -0.0085474564 -0.0729642950 -0.0315695104 0.0727168310 -0.0880397126 0.0013629186 0.0398602130 -0.1360140274 0.0632676969 0.0656717630 0.0521242798 -0.0293795289 0.0378275004 0.0108171576 -0.0478742986 -0.0259525915 0.0189555947 -0.0052434885 -0.0012462693 0.0509365341 0.0120988663 -0.0083730545 -0.0066572570 0.0268202685 -0.0132245852 -0.0346181267 0.0066114751 -0.0152529297 -0.0025939111 0.0520632352 -0.0562366495 0.0092407595 0.0734781751 -0.0215151640 -0.0760319567 0.0979245800 0.0144688877 -0.0849674784 0.0780981658 -0.0313954960 0.0106029428 -0.0481818245 -0.0260347662 -0.0847058227 -0.0274664430 0.0895410298 -0.1065782039 -0.1054604605 0.1262395424 -0.0214480157 -0.0208610150 0.0270523615 -0.0075596609 0.0131948367 0.0063326336 -0.0053856388 0.0050165287 -0.0020415950 0.0113184834 0.0044838167 -0.0149437571 -0.0013043573 -0.0032352999 -0.0001662671 0.0000889845 -0.0033808956 0.0048069863 -0.0042712822 -0.0018726178 -0.0014298993 0.0017480251 -0.0029109376 -0.0019495809 -0.0006129939 -0.0066734431 -0.0051026596 0.0062822429 -0.0019057257 -0.0064208703 0.0004743933 -0.0073619519 0.0073304586 0.0035184570 -0.0035058265 0.0016614770 -0.0001550914 -0.0017561263 0.0043805395 0.0015592368 0.0056909796 -0.0018685577 -0.0021525772 0.0021196643 -0.0002478654 -0.0107073412 0.0003135974 -0.0030426138 0.0114726902 -0.0032660299 -0.0104351846 0.0014539292 0.0044992221 -0.0012753784 -0.0015595445 0.0055047103 0.0027714233 0.0123114766 -0.0004710279 -0.0082788262 0.0105073495 -0.0002770010 -0.0084551685 0.0017687922 0.0042819854 0.0014043270 0.0458185683 -0.1109968307 0.0377414711 -0.0457939665 0.0135726326 0.0088461807 -0.0334700797 0.0518603502 0.0678079909 0.0505178943 -0.0901882918 0.1131271920 0.0221333232 0.0543319169 0.0613976267 0.0185684583 0.0346944202 -0.0092153364 -0.1695662267 0.1537766190 -0.0874383060 -0.1527722217 0.2177615806 0.0230616136 -0.0050355069 -0.0606196895 -0.0881947377 0.0003669521 0.2567930859 -0.0195155270 -0.0264396205 0.2093454545 -0.1428062134 -0.0032713384 -0.0031735119 0.0220110383 0.0140346724 0.0141520903 -0.0173255990 -0.0164160615 -0.0287372956 0.0032130848 0.0144066955 0.0125767402 -0.0174128907 -0.0074524601 -0.0014943950 0.0209600981 0.0163975984 0.0462015294 0.0077444329 0.0400953709 0.0723402051 -0.0558870788 -0.0060691124 -0.0097659252 0.0059288046 0.0662339522 0.0555481921 -0.0499961756 0.0362941598 0.0331320443 0.0109646264 0.0991672654 0.0321929389 -0.0769493589 -0.1187184565 -0.0229691066 -0.0245291076 0.0043219119 0.0027609693 0.0019625719 -0.0028710575 0.0064830614 -0.0006351426 0.0233387137 0.0211709526 -0.0554616966 -0.0146193274 0.0243137714 0.0353500949 0.0070122005 -0.0206353096 -0.0444568145 0.0432202464 -0.0438431905 0.0193949900 -0.0292189688 -0.0116408327 -0.0162464594 0.1030276695 -0.0191461069 0.0694180762 -0.0131170314 -0.0056292990 0.0454410684 -0.0644037362 -0.0206126486 -0.0135879373 0.0245738546 -0.0153594839 0.0249334917 -0.1057462346 0.0152575520 -0.0623854408 0.0161642466 -0.0016905855 -0.0151138742 -0.0085385368 0.0014800623 -0.0097415938 0.0141153416 -0.0049947294 -0.0056720023 0.0015636376 -0.0065103776 0.0169038734 -0.0015027959 -0.0029055126 0.0114372172 -0.0126905877 0.0041082041 0.0523641956 -0.0167068458 -0.0085948041 0.0024803397 -0.0025792734 -0.0070875937 -0.0188469005 -0.0181273639 -0.0086361925 0.0180336576 -0.0028589281 0.0059157823 -0.0309793153 0.0055367499 0.0085605140 0.0139212037 0.0067899710 0.0033796666 0.0069589539 0.0055649316 0.0049618205 0.0106300136 0.0158098093 0.0151229450 0.0198317177 -0.0113309414 0.0042116622 -0.0002445940 -0.0210972181 0.0123410000 0.0098065248 0.0115621053 -0.0076537036 -0.0068521710 -0.0309987456 -0.0064602011 -0.0195544701 -0.0165860145 0.0050941351 -0.0549830527 0.1085617964 0.0083840719 0.1254892576 0.0542904874 0.0240571789 0.0132135340 -0.0343368613 0.0157805232 0.0319526255 -0.0584436004 0.0207464029 -0.0366586545 0.0218411902 0.0205425898 -0.0105865705 -0.0106695307 0.0113781477 0.0429333432 -0.0040771216 0.0266191879 0.0082434252 0.0309133712 0.0246596725 -0.0569562239 -0.0245119723 0.0225255478 0.0928949205 0.0021975085 0.0197892289 0.0232909897 0.0230856457 0.0698763232 0.0318973498 -0.0005957594 -0.0377058005 -0.0036603400 0.0368883463 -0.0193524787 -0.0147188225 -0.0501911462 -0.0044645327 -0.0063504591 0.1163232575 0.1199133572 -0.2479714274 0.1764207999 0.0777217277 0.0546028682 0.0229813342 0.0471213105 0.0749383351 -0.0617171964 -0.0541435775 -0.0185981100 -0.0175020740 0.0660776051 0.1171540707 -0.0835935590 -0.0639913320 -0.0421051745 -0.0602188531 -0.1237893242 0.0095619573 -0.0416375179 0.0897596555 0.0449497522 0.0416297349 0.0128418169 0.1536439200 -0.0407758646 -0.0919983584 -0.1529221460 -0.0036621724 -0.1661923147 0.0423637615 0.0907947195 0.0314346934 -0.0945645553 0.1054092052 -0.0511234006 -0.0402453090 0.1692732461 -0.1380125102 -0.0657957823 -0.0965779536 0.0874546380 -0.0687700349 -0.0401643760 0.0950030309 0.0317824998 -0.0280085290 0.0292656283 -0.0044531785 -0.0644823723 -0.0081655824 0.0085032273 0.0226941708 -0.0624443551 0.0264094298 0.0647034023 -0.0344169880 0.0252357401 0.0312691786 -0.0875001648 0.0785952625 0.0185210172 -0.1065878553 0.0472154381 0.1495081542 -0.2079451996 0.0045242173 0.1726649769 -0.1983962336 0.0525970278 -0.0523979844 0.1125904228 0.0277971949 0.0787303098 0.0201490524 -0.0554506811 0.0918125693 0.0888517291 -0.0907396811 -0.0248835188 -0.0289206388 0.0227615046 0.0049302618 -0.0215549340 0.0061815829 0.0149710119 0.0039250003 0.0046397139 -0.0132547282 0.0112675776 0.0130625412 -0.0021604793 -0.0056943167 -0.0009445855 -0.0000719451 -0.0012803171 0.0020917780 -0.0034202745 0.0022260228 -0.0011904037 0.0022427895 -0.0014292154 -0.0024675239 0.0163342209 0.0173026936 0.0071837831 0.0012451008 -0.0013413337 -0.0005690744 0.0010564243 0.0060938136 -0.0004508979 -0.0013529300 -0.0017392347 0.0141539119 0.0003768430 0.0036632357 -0.0015772146 -0.0018645375 0.0016453311 0.0010002003 -0.0041681696 -0.0023300796 -0.0022625303 -0.0042999834 0.0025306247 0.0015101013 0.0004464632 -0.0019337557 0.0008502302 0.0016053154 -0.0039472042 -0.0009882768 0.0045451261 -0.0054396007 -0.0046495330 -0.0141457809 -0.0043718581 0.0079662964 -0.0140265933 -0.0062096878 0.0074652978 0.0115414512 -0.0152846649 -0.0220525617 0.0330479544 -0.0819650248 0.0297069721 -0.0301678075 0.0071044747 0.0074324710 -0.0246778608 0.0406797788 0.0427252773 0.0358820232 -0.0676373736 0.0792727401 0.0103712315 0.0365033081 0.0423264230 0.0087989867 0.0212803466 -0.0051179601 -0.1168989317 0.1092922402 -0.0613087042 -0.1058021001 0.1595634341 0.0072035585 -0.0005176771 -0.0429117106 -0.0584251832 -0.0105671520 0.1829474222 -0.0187586423 -0.0279664960 0.1493298760 -0.0996937110 0.0021528930 -0.0098461383 0.0182903171 0.0217322178 0.0153224709 -0.0081428186 -0.0164781751 -0.0309593800 0.0134364403 0.0160581010 0.0163727935 -0.0087699556 -0.0077041261 -0.0066005595 0.0151885423 0.0353573434 0.0373527682 -0.0026338506 0.0628114804 0.0778171790 -0.0422350457 -0.0089156607 -0.0126822236 -0.0021125380 0.0653919928 0.0767651755 -0.0420385910 0.0362391011 0.0397381706 -0.0056392338 0.0667675534 0.0228446685 -0.0523996319 -0.0775110202 -0.0133609479 -0.0171597052 -0.0068977115 0.0085941370 -0.0041352847 0.0035715432 0.0014700118 -0.0045108034 0.0244156633 0.0153264837 -0.0422980590 -0.0212836686 0.0208949192 0.0279035333 0.0174327944 -0.0192708051 -0.0364769824 0.0424431681 -0.0408306665 0.0020799559 -0.0133754935 -0.0117757261 -0.0121337539 0.0879595602 -0.0166373453 0.0316641591 -0.0193001167 -0.0122246953 0.0354028979 -0.0496682879 -0.0207346297 -0.0044387555 0.0152766662 -0.0210870960 0.0176034033 -0.0801308726 0.0204222605 -0.0303768859 0.0257275834 -0.0045830999 -0.0197927145 -0.0138924142 0.0006073849 -0.0072713749 0.0214502660 -0.0128363805 -0.0080106212 -0.0015175772 -0.0082731289 0.0272514779 0.0013694952 -0.0103254333 0.0126826675 -0.0207244171 0.0126106327 0.0833653036 -0.0289556866 -0.0089121944 0.0079524081 -0.0048025417 -0.0089172539 -0.0344521363 -0.0337608529 -0.0088724608 0.0313104317 0.0000030600 0.0082115302 -0.0602814239 0.0003806244 -0.0042624968 -0.0077209280 -0.0051521031 -0.0043330603 -0.0227716508 0.0129859116 0.0103934255 -0.0001521582 -0.0023935056 -0.0015318490 -0.0149491565 -0.0045887774 -0.0120263122 0.0066807030 -0.0114720583 -0.0328680906 -0.0123911450 -0.0271654665 0.0199855153 0.0017315943 0.0214792035 0.0068608532 0.0237028241 -0.0091306108 0.0124300723 -0.0150137084 0.0113293113 0.0024798244 0.0551256636 0.0027485510 0.0054793713 0.0154088136 -0.0011020806 0.0036768488 0.0112244671 -0.0062337402 0.0062105866 -0.0030516396 -0.0110807401 0.0011704751 0.0076360985 -0.0082051005 0.0026762725 0.0085726895 0.0019353137 -0.0039321909 -0.0096660507 -0.0041059114 -0.0017507506 0.0011428215 0.0086444116 -0.0034601920 -0.0262625985 -0.0080472541 0.0116943374 -0.0152248816 -0.0076488430 -0.0043523173 0.0113369599 0.0153331231 -0.0066014801 -0.0007575732 0.0007398492 -0.0139507320 -0.0110025154 -0.0158937672 0.0114970659 0.0089085116 0.1325371052 -0.1084947297 0.0024475749 -0.3861274951 0.3305001430 -0.2663314179 -0.1717616020 0.0920128352 -0.1029692989 -0.0982058023 0.1055971322 -0.0759234720 0.0612900175 -0.1031914519 0.0863905511 0.1398563675 -0.1817622051 0.0730911913 -0.0876665793 0.0823733799 -0.1038435912 0.1110759965 -0.0636466127 0.0713955094 0.0101364971 -0.0781752707 0.0488481891 0.3011966790 -0.3185830791 0.2098483541 -0.1185156812 0.1239094128 -0.1149397664 0.0778667685 -0.0412988492 0.0556096716 0.0918958032 0.0599563434 0.0269266355 0.0961609575 0.0813027838 -0.0202224376 -0.0324719859 0.0123390531 0.0348476516 0.0044825754 0.0092958622 -0.0417801184 -0.0527356245 -0.0279231886 0.0044667592 -0.0173014791 -0.0016640304 0.0030926676 0.0296823926 0.0056330430 -0.0105739944 -0.0061362133 -0.0156884365 -0.0000836890 -0.0327640813 -0.0495437586 0.0008523229 -0.0265929901 -0.0565112179 -0.0422264309 0.0483806914 -0.0218699097 -0.0043256654 0.0380182227 -0.0130064074 0.0522297820 0.0033302067 0.0060064062 -0.0407952389 -0.0228987600 0.0665755096 -0.0055679250 0.0384730943 0.0632548002 -0.0230648583 -0.0016269080 -0.0014974461 0.0013668423 -0.0050366077 -0.0307561522 -0.0234954299 0.0250880312 0.0222708508 0.0022545230 -0.0336162503 0.0188653081 0.0344107689 -0.0022105508 -0.0071441881 -0.0013849338 0.0005926259 -0.0082978737 0.0095115797 -0.0130652795 -0.0013412922 -0.0063841506 0.0082796498 -0.0043717509 -0.0077399642 0.0402531307 0.0409854330 0.0189810055 -0.0009446937 0.0000462791 0.0008309637 0.0031012327 0.0097023161 0.0044892178 0.0033776045 -0.0096992970 0.0385026672 0.0000970789 0.0081243760 0.0018539155 -0.0047238632 0.0041506708 0.0000275873 -0.0203238247 0.0002359284 -0.0060345406 -0.0244819463 0.0020145355 -0.0040521158 0.0000614638 -0.0046389895 0.0000615619 0.0089450558 -0.0119603002 -0.0090742318 0.0114992115 -0.0133123097 -0.0128278145 -0.0330890343 -0.0076770384 0.0133331856 -0.0363184178 -0.0070699244 0.0200271508 0.0231689161 -0.0320414923 -0.0534532668 -0.0026174714 0.0106416123 -0.0016136096 0.0014623893 0.0000570666 0.0046974147 0.0028653762 -0.0102370283 0.0006260081 0.0006063784 0.0009962642 -0.0033709997 0.0017810064 0.0046957002 -0.0068530434 0.0084757754 -0.0022383397 0.0067004244 0.0060979880 0.0033863261 0.0054203439 -0.0021770730 0.0042452788 -0.0098750964 -0.0023954359 0.0019702186 0.0015707123 -0.0023918531 0.0050897582 -0.0088344310 0.0115350921 -0.0136008582 0.0153920696 0.0018976148 -0.0012919108 0.0020424205 0.0028459781 -0.0003051546 -0.0001508174 0.0009709205 -0.0021526873 0.0004837045 0.0024576408 -0.0007922392 -0.0005990700 0.0010525386 -0.0019032421 0.0008028909 0.0039097692 -0.0004876486 0.0009579071 0.0037285032 0.0019607063 -0.0016824612 -0.0010184006 -0.0002495418 0.0000349743 0.0041812104 0.0003236191 -0.0016785807 0.0031147326 -0.0010826803 0.0012631852 -0.0032954399 -0.0020446563 0.0025252534 0.0005202884 -0.0010178217 0.0015678603 -0.0014379970 0.0014565558 0.0002275090 -0.0016330224 0.0009333209 -0.0010365243 -0.0064197619 0.0006496751 -0.0119765417 -0.0051161119 -0.0002341503 0.0034700578 0.0038550750 0.0023416014 -0.0093798379 0.0138061131 -0.0041550783 0.0015148310 0.0094468925 0.0011055655 0.0008212147 0.0244701022 -0.0066827895 0.0209037645 0.0015673744 -0.0093017792 0.0094542564 -0.0026979522 -0.0016913385 -0.0108656628 0.0090532243 -0.0107394192 0.0164431371 -0.0101911919 0.0098992707 -0.0162698984 0.0066368998 -0.0005673810 -0.0139736308 -0.0051056700 -0.0018198135 0.0073605770 0.0091879104 0.0012653051 -0.0119049199 -0.0067475686 0.0011631423 0.0181769288 0.0055980430 0.0018327885 -0.0033550624 -0.0269890628 0.0019789886 0.0501872256 -0.0075129222 -0.0027392378 0.0147308067 0.0129173789 -0.0012603011 -0.0165903344 -0.0123101257 -0.0023441556 0.0211722508 0.0247184429 0.0001270443 -0.0399831376 -0.0228996596 -0.0334918328 -0.0564583891 -0.0365849054 -0.0253234822 -0.0733936394 0.0036053571 -0.0236309627 -0.0599386133 -0.0225480713 -0.0407541828 -0.0468277001 -0.0150485975 -0.0030782377 0.0101471313 0.0043238234 0.0264009057 0.0346801062 -0.0711965223 -0.0234009891 0.0533363259 0.0263624616 0.0275837799 0.0286700199 -0.0413321655 0.0171134620 -0.0477913369 0.1054257493 -0.0005900247 0.2147023566 0.0347811229 0.0195899840 0.0607826826 -0.0813919064 0.0090765718 -0.0113865152 -0.0905440788 0.0041028206 -0.0512749196 -0.0986731905 0.0015899483 0.0641877530 -0.0946019102 -0.0036894216 0.0286379827 0.0376618977 -0.0465225953 -0.0706853658 -0.0413552733 -0.0231792082 0.0504622774 0.1094179947 -0.0403101391 -0.2543000805 -0.0211264563 0.0139240680 -0.1192925293 -0.0317229094 -0.0176608995 0.1009002327 0.1184777835 0.0020995216 0.0069656806 -0.0390685086 -0.0769637986 -0.0393114932 -0.0085294722 0.0763478167 0.0540997401 -0.0262830638 0.0400770776 0.0203465030 0.0813670872 -0.0629897179 0.0110804872 0.0208924405 -0.0478079740 0.0010945930 0.0267779753 -0.0117178593 0.0305949032 -0.0403820369 0.0065187358 0.0092603531 -0.0392157000 0.0019289715 -0.0376406950 0.0315343584 -0.0231832735 -0.0119900193 -0.0142340724 0.0228029727 0.0026112919 -0.0438544522 0.0139153092 0.0080483996 -0.0909643275 0.0428137648 -0.0445430525 0.0208601404 -0.0229751631 -0.0191492396 -0.0175394574 0.0225691033 0.0092693165 -0.0240097057 0.0288931634 0.0052389108 -0.0265382897 0.0252980921 0.0169997396 0.0340413397 -0.0347725741 0.0241534240 0.0160721750 -0.0393818069 -0.0052985165 0.0122548570 -0.0138426918 0.0128035718 0.0206680940 0.0044755808 -0.0119699030 -0.0184039467 0.0192656955 -0.0169844093 -0.0324959704 0.0171767480 0.0032182366 -0.0079217532 0.0243874856 -0.0137686374 0.0100606719 0.0260354972 -0.0168063667 -0.0608021518 0.0683211016 -0.0101608470 -0.0757447026 0.0818602660 -0.0078952847 0.0386781876 -0.0468972099 -0.0037190629 0.0178509520 0.0060371872 -0.0159788578 -0.0070176555 0.0286032252 -0.0104334378 -0.0052130415 -0.0071017617 -0.0043268862 -0.0000337159 0.0054494682 -0.0090702933 -0.0026074063 -0.0000063116 -0.0021742661 -0.0005758996 -0.0046462977 0.0013358925 0.0000391130 0.0010982875 -0.0001103265 -0.0005141295 0.0018976135 -0.0031429179 0.0032817668 0.0013242747 0.0005115849 -0.0031076385 0.0020225684 0.0027805767 -0.0021353492 -0.0014203226 0.0013985155 -0.0030376182 0.0011271610 0.0021933398 0.0015364669 -0.0002033848 0.0001013889 0.0008782505 0.0018732587 -0.0032175190 0.0010027731 0.0034664514 -0.0073057063 0.0054478411 -0.0000319348 0.0034342250 -0.0031999968 -0.0015816881 -0.0005608964 0.0024591297 0.0016026423 0.0066110200 -0.0032178842 0.0020868809 0.0029984262 -0.0034262072 0.0024205911 0.0033530880 -0.0030840721 0.0021954087 0.0029332422 -0.0019559722 0.0010554645 -0.0002738896 -0.0023577494 0.0022572949 0.0019693942 -0.0033602077 0.0015609067 0.0025959684 -0.0131693310 0.0342929972 -0.0001917661 0.0265016733 0.0087965990 -0.0000163364 0.0242101090 -0.0098020130 -0.0286611010 0.0003883089 0.0219763385 -0.0365704932 0.0085582341 -0.0089712433 -0.0217557689 0.0110711314 0.0105836758 0.0143912010 0.0792918557 -0.0080178874 0.0277635046 0.0622457556 -0.0510096131 -0.0252626691 -0.0036199268 0.0130077229 0.0245851463 0.0022784692 -0.0664993551 -0.0042917262 0.0166782184 -0.0308637771 0.0496440709 0.0067046301 -0.0089797060 -0.0012767192 0.0096638937 -0.0011383721 0.0092506505 0.0041736355 -0.0046499036 0.0089147794 0.0060676210 -0.0009606903 0.0062395068 0.0043401179 -0.0096930087 -0.0079319950 0.0215708460 -0.0184563616 -0.0079030122 0.0212678456 0.0022141751 0.0128224596 -0.0035840669 -0.0015539227 -0.0056461041 0.0006384759 0.0095249729 0.0078805635 -0.0001769180 -0.0071561533 -0.0120134506 -0.0403413629 -0.0117958742 0.0192127460 0.0184587519 0.0047876326 0.0146640105 -0.0118193784 0.0071213210 -0.0032370637 0.0001206510 -0.0009792622 -0.0054050652 -0.0147425377 0.0266379208 -0.0528502655 0.0073034603 0.0121428952 0.0841810559 -0.0084836492 0.0295269591 -0.0936142896 0.1042180550 -0.0404528797 0.0641602314 -0.0482544768 0.0381481851 -0.1101375700 0.1692131904 -0.0619321051 0.1922871208 0.0306009404 -0.0462116113 0.0754079365 -0.0434161054 -0.0161459633 -0.0963026759 0.0394117920 -0.0509326931 0.0208253395 -0.1590468806 0.0512223682 -0.2556189750 0.0021420411 -0.0106298936 -0.1085347102 -0.0145381773 -0.0227762974 0.0697807004 0.0383733929 0.0453025451 -0.1015683849 -0.0651440900 0.0390936188 0.1110666862 0.0443866488 0.0464874761 -0.0353132199 -0.2308865188 -0.0029418090 0.3108624530 -0.0119910799 -0.0155881617 0.1219330513 0.1393503329 0.0131099297 -0.0833501494 -0.0653409898 -0.0102459891 0.1455168233 0.2325158597 -0.0066840620 -0.2379893247 -0.0051546389 -0.0033293887 -0.0066745064 -0.0003188615 -0.0040325150 0.0050528090 -0.0138248307 -0.0110137806 -0.0097508318 -0.0059127129 -0.0060874340 -0.0045964533 0.0089325521 0.0035749518 -0.0010697161 0.0221684871 0.0018743697 -0.0053754220 0.0066432549 -0.0020546090 0.0030145044 0.0103363661 -0.0003857616 0.0108548390 0.0667620798 0.0104386553 0.1436484280 -0.1054165535 0.0546782199 -0.1390908798 -0.0072522287 0.0282166818 0.0061110640 -0.0566234092 0.0443773668 -0.1854295329 0.0085839252 0.0419139377 0.0042028607 -0.0127131305 0.0476095586 0.0196899395 0.0433438583 0.0267351369 -0.1743565444 0.0332141429 0.0157801351 0.0044378194 -0.0539419210 0.0260882835 0.1504100897 0.1484927232 0.0170644531 -0.1610077661 0.0351293276 -0.0379351749 0.0029949826 -0.0450122901 -0.0218348623 0.0219454216 0.0098195802 0.0014853853 -0.0010481405 -0.0060574719 -0.0133342542 0.0050294734 -0.0030386417 -0.0007964426 0.0147037404 0.0106835349 -0.0000716675 -0.0043435641 -0.0046799865 0.0161019221 -0.0139654610 -0.0068274920 0.0008622375 -0.0034933772 -0.0052812373 0.0026188579 -0.0003754266 -0.0031932273 -0.0025509452 0.0127886681 -0.0001150645 -0.0145631084 -0.0031599933 -0.0044137202 -0.0033567230 -0.0084951433 0.0031223293 0.0028724298 0.0075775693 -0.0049132228 -0.0008160770 0.0117696432 0.0046195548 -0.0186478177 -0.0002751593 -0.0076535547 -0.0016479897 -0.0102829236 0.0059451080 0.0039643638 0.0003579276 0.0074268990 0.0077039638 0.0010294922 0.0095732295 0.0062302586 -0.0024113038 -0.0010770702 -0.0014918618 0.0036807496 0.0018406053 -0.0011660521 -0.0029237500 -0.0039228791 -0.0034418503 0.0009058682 -0.0015497423 -0.0001204322 0.0001370861 0.0013612399 0.0019052933 -0.0013888308 -0.0017378942 0.0003031665 -0.0000691807 -0.0040771547 -0.0028499628 0.0000425519 -0.0026110778 -0.0041922271 -0.0038534778 0.0016462189 0.0015565104 -0.0015043055 -0.0008115703 0.0046490446 0.0036433955 0.0028706241 -0.0026015967 -0.0025364592 0.0049545649 0.0061843237 -0.0067090389 0.0076102600 0.0085016001 -0.0077438322 -0.0075549693 -0.0281863840 -0.0457040206 0.0001034386 -0.0013098962 -0.0016639513 0.0005383286 -0.0001631547 0.0000103184 -0.0013592265 -0.0003623445 0.0017986414 0.0000048859 0.0002711036 -0.0001304800 0.0003225271 0.0002124550 -0.0005491878 0.0005812542 0.0004254894 0.0000944979 -0.0003930943 0.0005036983 0.0003395979 0.0004689373 0.0009408606 0.0006386476 -0.0005948278 0.0002223107 0.0005531650 -0.0000343400 0.0008406591 -0.0011959014 -0.0004618059 0.0002334848 0.0000681827 0.0004150628 0.0003322602 -0.0008149389 -0.0000005101 -0.0003533135 0.0000301453 -0.0000140468 -0.0008770513 -0.0003307233 0.0016830996 0.0000859705 0.0009625427 -0.0017308380 0.0005112308 0.0017072665 -0.0005287451 -0.0004256474 0.0006563784 0.0003655188 -0.0007585856 -0.0003550910 -0.0013324839 0.0000191244 0.0006362514 -0.0012558687 0.0000759377 0.0008999369 0.0000034113 -0.0005770497 -0.0006904716 -0.0009364308 -0.0308722578 -0.0419621865 -0.0307602683 -0.0131260616 -0.0475326186 -0.0100211038 0.0030724261 0.0684551420 0.0003812029 0.0040050166 0.0567059467 0.0054889776 0.0049218926 0.0601411858 -0.0285272744 -0.0118631979 -0.0623829457 -0.1083538092 -0.0397512227 -0.0724909775 -0.0710203431 0.0113263290 0.1153819634 -0.0034494752 -0.0064763864 -0.0420428995 0.0718642644 0.0441486091 0.0770390668 0.0067563711 0.0043128673 -0.1101277866 0.0163024410 -0.0274312420 -0.0474872223 0.0199720897 0.0059045028 0.0607210806 0.0067251554 0.0049208511 0.0531693211 0.0052981555 0.0084759557 0.0559834147 0.0172810320 -0.0253087610 -0.0614787076 0.0745563588 -0.0815117942 -0.0723382946 0.0862366819 -0.0065834380 0.1092770243 -0.0038305326 -0.0091492450 -0.0379779330 -0.0501052469 0.0648414479 0.0790902964 -0.0215143562 -0.0000688582 -0.1060469913 0.0569931697 0.0120814023 -0.0323243684 -0.0402732654 -0.0138270159 -0.0171926971 -0.0514221408 0.0258064250 -0.0260400061 0.0296220617 -0.0227645162 -0.0184535035 -0.0042294611 -0.0095519871 -0.0014800412 0.0625008834 -0.0290065896 0.1067661675 -0.0531696891 0.0009314488 -0.0937664364 0.0635510350 -0.0024034153 0.1236255305 -0.1019947690 0.0102978333 -0.2074904910 0.1279926129 -0.0039543589 0.2206616988 0.0348154689 -0.0102869959 0.0788149118 -0.0650379273 0.0195191902 -0.0949105814 -0.0475836934 0.0035958899 -0.0146712238 -0.2118505835 0.0438800842 -0.3375930344 -0.0710616501 -0.0170798059 0.0854196077 0.0061796882 -0.0192752333 0.0127469443 -0.0346055403 0.0041012857 0.0564346274 0.0464624340 0.0132872608 -0.0838446150 0.0498273446 -0.0061340722 -0.0160330069 0.1600078967 -0.0114802670 -0.2886372533 0.0515834544 -0.0096592054 -0.0728816592 -0.0360319376 0.0232303330 0.1108441504 0.0814773445 -0.0116993265 -0.1836824493 -0.0801779165 0.0268710688 0.1898037260 -0.0014456768 -0.0016736981 -0.0030421497 -0.0019227252 -0.0008925188 -0.0026737022 -0.0007701879 -0.0012367623 -0.0029402979 -0.0022446833 -0.0025612927 -0.0030069800 0.0006898244 -0.0004248150 0.0002141729 0.0031311471 0.0001227757 0.0002287202 -0.0025094004 -0.0013067541 0.0025183839 0.0028835425 0.0004630543 0.0028895849 -0.0859974628 -0.0121508289 0.0198863809 -0.1088310195 -0.0249508906 0.0508144734 -0.1089115209 -0.0252139822 0.0452724355 -0.0341581222 -0.0808618627 -0.0158253138 -0.0607702599 -0.0284883729 0.0070513486 0.0418648176 -0.0248453399 0.0108669767 -0.0334953853 -0.0826015920 0.0006489098 0.1457380855 -0.0746494257 0.0642508877 0.1120762952 -0.0178351314 0.0109098513 0.1763227995 -0.0787466984 0.0907238548 0.0362669687 -0.0105656248 0.0307441152 -0.0073490012 0.0212763958 0.0356508864 0.0015183129 0.0043241246 -0.0155100776 0.0066549332 -0.0095211362 0.0073077732 -0.0153835739 -0.0083403660 0.0078152194 -0.0126412962 -0.0482603416 -0.0314833760 -0.0875475053 0.0802101010 0.0606408679 0.0217232124 0.1175544191 0.0333120490 -0.0456139632 -0.0235427194 -0.0245813491 0.0955755295 0.0305611892 -0.0549741146 0.0778807612 0.0758546661 0.0800070681 -0.0843288673 0.0295977072 0.0873754793 -0.0145650362 -0.0633509793 -0.0190381942 0.1120823875 0.0531798937 -0.0316421691 0.1662781632 0.0114164293 0.0150028784 -0.0716178316 0.0095763415 0.0893423805 -0.0058491468 -0.0635809071 -0.0303241582 -0.0095377337 -0.0692430723 -0.0494901593 -0.0163197826 -0.0608161677 -0.0447326150 -0.0121956490 0.0181533647 -0.0670954604 -0.0194179166 0.0331224430 0.0593068469 0.0353178655 0.0404019290 -0.0065461316 -0.0245398346 -0.0029660674 -0.0050900091 -0.0247868830 -0.0366756923 0.0165206117 0.0353626292 0.0039633545 0.0117569257 0.0430932713 0.0036597136 0.0422251405 0.0243194926 -0.0023047271 0.0529519272 0.0218924902 -0.0801295728 -0.0085011136 0.0425498156 -0.0767151708 -0.0274132745 -0.0132150271 0.0371110781 0.0581823074 -0.0425446344 -0.0639196291 -0.0459431560 -0.0527168467 -0.0175636357 -0.0667740149 -0.0097371990 -0.0459860766 0.0155175749 0.0166656665 -0.0121839543 -0.0046784350 0.0097489164 -0.0100206630 0.0019842949 -0.0114950692 -0.0033517607 0.0075046295 -0.0001529591 -0.0006564414 0.0002656919 -0.0010574569 0.0019001204 -0.0084113282 0.0062434815 0.0029527514 0.0025802827 -0.0049613639 0.0033260896 0.0041889432 -0.0003841732 0.0093196209 0.0056130794 -0.0096553739 0.0026371301 0.0089337079 -0.0011582790 0.0047072053 -0.0099595032 0.0014434666 0.0017835610 -0.0038728908 -0.0014288702 0.0076871607 -0.0110167188 0.0052127534 -0.0008702223 0.0045722384 0.0042114657 -0.0021936307 0.0011841880 0.0154189426 0.0002756515 0.0069359079 -0.0065784306 0.0029634341 0.0077430108 -0.0063323292 0.0020512956 0.0072007689 -0.0022543349 0.0006502735 0.0028906659 -0.0180664874 0.0006245394 0.0123420620 -0.0146997715 0.0004008953 0.0114731555 -0.0033377238 -0.0060506678 -0.0015896218 -0.0054919819 -0.0303673839 0.0148322916 0.0479039900 -0.0080840067 -0.0344769181 0.0481935985 0.0182888111 -0.0288837556 0.0650958743 -0.0080383004 0.0035088513 0.0707003267 0.0380091449 -0.0072848656 0.0708167076 0.0345870289 0.0038873613 0.0616874399 0.0637691831 -0.0504713202 0.0121316224 0.0681043576 -0.0442525258 -0.0116284623 -0.0129785241 -0.0054304738 0.0534774749 0.0825372252 -0.0298485547 0.0953334099 0.0759190190 -0.0597524866 -0.0644128880 -0.0042628329 -0.0357361488 -0.0391223272 0.0465078756 -0.0359947185 -0.0811616255 0.0004148213 0.0106344484 -0.0624102235 0.0783186811 -0.0103387410 -0.0844264388 0.0453409740 0.0152180058 -0.0438878431 0.0985945653 -0.0546707986 0.0418813983 0.1260101503 -0.0657669244 0.0081364873 -0.0246055282 -0.0043002554 -0.0069421400 0.1641997276 -0.0480212022 -0.0888343626 0.1298679882 -0.0678656012 -0.0449967119 -0.0137931426 -0.0170528206 -0.0602223511 -0.0104204433 0.0303124527 0.0463900298 -0.0305305140 -0.0212935025 0.0674549145 -0.0290733930 0.0288739027 -0.0852371846 0.0040048834 0.0680884153 0.0376982827 -0.0420274151 0.0049475464 -0.0369235860 0.1189916691 0.0168828871 0.0054522238 0.0596827577 0.0229959945 -0.0010277202 0.1093006975 -0.0569905984 -0.0993120603 -0.0643563504 0.0593866677 0.0806448750 -0.0509985172 -0.0459149551 0.1417059333 0.0200419112 -0.0900237093 0.0027215727 -0.0324157253 -0.0527991853 0.1224964230 -0.0038016735 -0.1417065523 -0.0602042287 -0.0523044876 -0.0194015348 0.1126765448 -0.0531245501 0.0876232121 -0.1091247900 -0.0335437640 -0.0758667877 -0.1794232617 0.0980354177 -0.0964380852 -0.0053170284 -0.0417573717 -0.0487883374 -0.1979658398 0.0670652864 -0.1094206143 0.0825331656 0.1238512386 0.0435878094 0.0381631762 0.0841574238 0.0108893363 -0.0015274187 0.1320222750 -0.0325727930 0.1217374261 -0.1098218667 0.0395123405 -0.0022909100 -0.0083329317 -0.0053847002 -0.0037024309 0.0024042720 0.0124052723 -0.0110155027 -0.0089258174 -0.0016951051 -0.0205285910 -0.0190908034 -0.0172869714 0.0140666355 0.0170584450 -0.0060470338 -0.0053705575 0.0220764810 0.0027464516 0.0073556167 0.0180957207 -0.0024035902 0.0275136005 0.0324134879 -0.0126564882 -0.0507430333 0.0214757221 0.0052487623 -0.0937547381 0.0086512593 0.0539367299 -0.0729253437 0.0041831383 0.0294558662 0.0170071042 -0.0408964997 0.0159904917 -0.0148165376 0.0079605499 0.0088550652 0.0381793487 -0.0224753851 -0.0066053550 0.0161410733 -0.0399660402 -0.0086138872 0.0631568854 -0.0403590647 0.0448858335 0.0682084928 -0.0150261148 -0.0176685881 0.0530924397 -0.0429776795 0.0979821793 0.0000512874 0.0077719970 0.0578681760 -0.0111666477 0.0250884535 -0.0079905258 -0.0253425775 -0.0223483864 -0.0129416067 0.0376946218 0.0007424893 -0.0008876263 -0.0208284125 -0.0140704840 -0.0269365686 0.0365255269 0.0960853840 0.0368243918 0.1567832476 -0.1298243839 -0.1092620286 -0.0408498066 -0.2030056353 -0.0561117878 0.0782484370 0.0417814281 0.0393911269 -0.1681884077 -0.0520151979 0.1054057129 -0.1397690291 -0.1414271532 -0.1415183904 0.1456431456 -0.0556025312 -0.1566564401 0.0271845526 0.1156637415 0.0377745779 -0.1970598252 -0.0947874080 0.0636735526 -0.2897709000 -0.0324054734 -0.0272552256 0.1310118854 -0.0247143246 -0.1545929554 0.0255247525 0.1175702189 0.0453572946 0.0333864315 0.1172007163 0.0865747697 0.0538925262 0.0913829193 0.0738879488 0.0083849190 -0.0240544801 0.1148978115 0.0320398131 -0.0471776601 -0.1059972203 -0.0735799156 -0.0714286454 0.0078501036 0.0339988601 0.0043909232 0.0142678664 0.0526447195 0.0619413903 -0.0236115481 -0.0537457067 -0.0114558366 -0.0227410972 -0.0779548090 -0.0235297914 -0.0672265265 -0.0462693768 -0.0055772726 -0.0865493443 -0.0152335640 0.1232577255 0.0160022784 -0.0485280386 0.1126511608 0.0560294525 0.0143558803 -0.0568699171 -0.1031950482 0.0767721465 0.1154716553 0.0899507144 0.0828348945 0.0368898216 0.1258638600 -0.0001786523 -0.0178758838 0.0130354359 -0.0275871907 0.0173553908 0.0062052614 -0.0135250247 0.0192836174 -0.0037245186 0.0149086741 0.0080943930 -0.0102792265 -0.0012479353 -0.0021342312 -0.0001821683 -0.0003350438 -0.0042303834 0.0130401666 -0.0110259038 -0.0015751850 -0.0046604597 0.0082465823 -0.0067488381 -0.0077842143 0.0057804960 -0.0105298564 -0.0068568931 0.0160696253 -0.0045380473 -0.0145994002 0.0037197922 -0.0055599253 0.0179736444 -0.0040002390 -0.0041180392 0.0113570600 0.0024858698 -0.0096195354 0.0103060572 -0.0065600456 0.0052834905 -0.0055206610 -0.0116759815 0.0010959177 -0.0041290136 -0.0165149332 0.0001003316 -0.0041073911 0.0172059826 -0.0070365864 -0.0163588470 0.0090553569 -0.0006662076 -0.0093055277 0.0048575385 0.0005749154 -0.0039064212 0.0261256477 -0.0021013146 -0.0184961658 0.0197693497 -0.0020885914 -0.0163593451 0.0086608421 0.0058274514 -0.0041902054 0.0095396836 -0.0460851034 0.0132563317 0.0231995441 -0.0191737861 -0.0174084710 0.0140768258 0.0304572287 -0.0084115697 0.0424154959 -0.0260926724 0.0258862952 0.0308595390 0.0378898023 0.0005762423 0.0392607978 0.0044115506 -0.0021649350 -0.0066589272 0.0517209927 -0.0520463619 -0.0404167087 0.1122890181 -0.0348980123 -0.0053274777 -0.0215276013 -0.0134947485 0.0122702675 0.1256582805 -0.0382372470 0.0405937235 0.0682202473 -0.0670465737 -0.0328048490 0.0028253189 -0.0129230787 -0.0240190973 0.0196508685 -0.0261805082 -0.0430363520 0.0032223978 -0.0030255824 -0.0383991696 0.0391609812 -0.0116337178 -0.0471201391 0.0329806249 0.0165323875 -0.0342876349 0.0613911833 -0.0170147217 0.0056566889 0.0561691902 -0.0442261841 0.0061016581 -0.0104233651 0.0008118633 -0.0068199510 0.0672664972 -0.0307859686 -0.0493742748 0.0697426963 -0.0199663939 -0.0092388183 -0.0005635730 -0.0172213283 -0.0438109830 -0.0055965166 0.0105862327 0.0304332895 -0.0199231302 -0.0090271033 0.0332867280 -0.0138103904 0.0177480200 -0.0530435315 -0.0107376570 0.0353183249 0.0122672398 -0.0350206122 -0.0189401171 -0.0096932482 0.0535800708 0.0267582502 -0.0115753202 0.0427930674 -0.0079220524 0.0377673085 0.0420443085 0.0059071727 -0.0727934011 -0.0190923930 -0.0032383216 0.0323615624 -0.0282180012 -0.0380564654 0.0897460417 0.0166569799 -0.0319150636 -0.0091062813 -0.0170258732 -0.0111105850 0.1079493242 -0.0000258767 -0.0115968187 -0.0222905360 -0.0211792036 0.0149720946 0.0602412892 -0.0186402368 0.0409445209 -0.0628532686 -0.0359897876 -0.0188848865 -0.0843290126 0.0385760163 -0.0711729644 -0.0107794285 -0.0404833662 -0.0261220291 -0.0537587598 0.0392429533 -0.1180370833 0.0455913128 0.0775409673 -0.0025595968 -0.0156247338 0.0386355756 0.0170278822 0.0245461928 0.0796081038 -0.0557467952 0.0173249942 -0.0654747933 0.0546010116 0.0019273544 0.0118762657 0.0046598383 0.0033968144 -0.0055691182 -0.0263666806 0.0186702596 0.0146269666 -0.0008799387 0.0317827007 0.0296557336 0.0238399798 -0.0236953845 -0.0306131515 0.0120600651 0.0135111934 -0.0407705851 -0.0052043113 -0.0193273267 -0.0277052371 0.0073655470 -0.0426893965 -0.0539752694 0.0265114643 -0.0993670271 -0.0094981487 0.0283382942 -0.2264989557 -0.0655924600 0.0548211403 -0.1857042223 -0.0752807419 0.0619683481 -0.0176731684 -0.0214707338 -0.0217258468 -0.0339661746 -0.0109708429 0.0046934664 -0.0055140350 0.0093244643 -0.0029252204 -0.0035041272 -0.0029909174 0.0096801991 -0.1257570865 0.1210715936 -0.0453721565 -0.0676912966 0.0298770906 -0.0192285556 -0.1732326226 0.1242346317 -0.0272345746 -0.0111284370 0.0163503228 -0.0193096460 -0.0230391037 0.0003549553 0.0375376751 0.0118957647 -0.0033700290 -0.0025365798 0.0016301968 -0.0115003785 -0.0026899127 -0.0071417351 0.0069477919 0.0017141506 -0.0042419997 0.0127425374 -0.0083309819 0.0030165993 -0.0015826840 0.0055976879 0.0034791330 0.0026360538 0.0025916115 0.0005570962 -0.0029276130 0.0015258503 0.0020672366 0.0026505407 -0.0024960403 0.0004229261 0.0051721036 0.0013172131 -0.0013315514 -0.0014575577 0.0050339770 -0.0024652861 -0.0015080460 -0.0009912583 0.0027124472 0.0043585607 -0.0013221378 0.0008283777 0.0052427792 -0.0033762339 0.0005771014 -0.0053392158 0.0057683321 -0.0005191992 -0.0006005949 -0.0022986436 -0.0025766713 -0.0064429392 -0.0011964721 -0.0005578839 -0.0122006301 0.0031887561 0.0000191593 0.0026161769 -0.0035633776 -0.0025090314 0.0007177537 0.0029880036 0.0031808557 0.0042528571 0.0013240502 0.0011714291 0.0013358166 -0.0032986323 -0.0029664388 -0.0039282016 -0.0010666891 -0.0004427852 -0.0005389442 0.0029868546 0.0069429962 -0.0011263996 0.0033431498 0.0066782715 0.0012404726 0.0025152962 -0.0007785847 -0.0072929184 0.0003448982 0.0008438067 -0.0080137332 -0.0000086144 0.0017660516 0.0015786072 0.0027039674 -0.0011331951 -0.0032593508 -0.0023325151 -0.0044315503 0.0017790054 -0.0032166874 0.0052175947 0.0369579976 -0.0110369877 0.0037619340 -0.0016255296 -0.0030738337 0.0013478970 -0.0021679341 -0.0002613641 -0.0026101221 -0.0021186177 0.0020251694 0.0001741347 0.0010894966 -0.0002261074 0.0002604222 0.0008036418 -0.0016147809 0.0022844029 -0.0010727638 0.0004084588 -0.0014191491 0.0014219869 0.0018268262 -0.0005519978 0.0014715766 0.0013024166 -0.0025465545 0.0007781209 0.0025644814 0.0000673705 0.0013298408 -0.0019476109 0.0012756790 0.0007092296 -0.0012223855 0.0000270395 0.0015606931 -0.0015511998 0.0055817564 0.0006341217 0.0031358964 0.0010456606 0.0016429097 0.0012907785 -0.0042677441 0.0008768968 -0.0006726661 -0.0053346767 0.0019980507 0.0034235643 -0.0005026103 -0.0009455519 -0.0004371600 -0.0026921524 0.0000889431 0.0010341571 -0.0037616188 0.0004208265 0.0028655330 -0.0033747714 0.0003391326 0.0029267522 -0.0014199982 -0.0007365529 0.0004895408 0.0015523612 -0.0661692137 0.0228365939 0.0523243124 -0.0303058118 -0.0406370397 0.0420980468 0.0405430385 -0.0313100355 0.0876291395 -0.0315132802 0.0272109284 0.0807684828 0.0626423423 -0.0055304480 0.0878439979 0.0280883208 -0.0002874102 0.0338269421 0.0849561118 -0.0838618527 -0.0379382098 0.1549279837 -0.0661621697 -0.0108224330 -0.0283992763 -0.0164394673 0.0499642895 0.1794744280 -0.0596093895 0.1083905692 0.1169937788 -0.1081869687 0.0453597688 0.0106790313 0.0266339473 0.0234255101 -0.0319634144 0.0284228328 0.0617634876 0.0012795986 -0.0091427860 0.0469829037 -0.0599164002 0.0084578040 0.0646309624 -0.0324461305 -0.0107191819 0.0283185672 -0.0643140976 0.0414665594 -0.0438397872 -0.0949904456 0.0501627419 -0.0042243865 0.0183411522 0.0041758303 0.0044716418 -0.1264547905 0.0374964071 0.0717951176 -0.0949646315 0.0527399747 -0.0398707806 -0.0104091730 -0.0293957570 -0.0819156731 -0.0125783683 0.0314062001 -0.0324738608 0.0215080290 0.0170357028 -0.0492909773 0.0210984331 -0.0205939876 -0.1414493766 -0.0141447186 0.1173105698 0.0121245536 -0.0639876632 0.0105562152 -0.0283527258 0.1918268088 0.0298005656 0.0295253355 0.0845218002 -0.0016840338 0.0386037577 0.1738217512 -0.0765426324 -0.1419642605 -0.1065571421 0.0392908864 0.0676692615 -0.1277769642 -0.0741068413 0.2208827126 0.0181770890 -0.1199145259 -0.0456574908 -0.0987199887 -0.0521190505 0.2050233215 0.0381039577 -0.1359733242 0.0167709188 0.0474204927 -0.0057421486 -0.1078758783 0.0556125054 -0.0961840139 0.0775326527 0.0912855464 0.0666727145 0.1699496980 -0.0714992123 0.0892061072 -0.0111341231 0.0971761028 0.0337888332 0.1580553140 -0.0941875463 0.0795055799 -0.0654157967 -0.1439889577 -0.0303574723 0.0041185540 -0.0731094637 0.0102190623 -0.0022389164 -0.1498290872 0.0488972390 -0.0801483495 0.1195951747 -0.0159821359 -0.0016555934 -0.0020282716 -0.0029176143 -0.0012730541 0.0007195913 0.0034876213 -0.0050263382 -0.0027938461 -0.0019945543 -0.0065627954 -0.0051164645 -0.0059175216 0.0056406467 0.0036452996 -0.0015471406 0.0042703334 0.0040253701 -0.0009467143 0.0018612222 0.0042837404 0.0003009634 0.0090614074 0.0064961594 -0.0006014675 -0.0049242975 0.0192072812 -0.0140478698 -0.0000452287 0.0162128013 0.0358233443 0.0016614039 0.0164719825 0.0060699214 0.0223915996 -0.0043451761 0.0158538227 0.0058397036 0.0124271859 0.0011758475 0.0058967929 -0.0163078344 -0.0027624517 0.0255956129 -0.0057346917 -0.0170885979 -0.0059717114 -0.0133173453 -0.0076611183 -0.0100969607 -0.0197681398 0.0129248966 -0.0106642408 -0.0109543904 -0.0380088324 -0.0127865034 0.0169468374 0.0042264624 -0.0179818380 -0.0107029697 -0.0011777516 0.0038536253 -0.0008433868 -0.0003869014 0.0024268264 -0.0014093584 -0.0020016419 0.0001369042 -0.0009793580 0.0035393721 -0.0797198422 0.2237746352 -0.1123125031 0.0208519436 -0.0484162442 -0.0149855367 0.0025729508 -0.0435772014 -0.0182524989 0.0210931870 0.0165741596 0.0264529819 -0.0335478017 -0.0085320966 0.0066208624 -0.0062155275 0.0090919704 -0.0176516806 0.0356401393 0.0140237241 -0.0168925842 -0.0013480228 -0.0018447080 0.0100615715 -0.0438558861 0.0143196108 0.0040669353 -0.0454647087 0.0377450806 0.0173111924 0.0178648699 0.0032291381 -0.0340099753 -0.0307010921 0.0348366971 -0.0048571104 -0.0429604822 -0.0914315015 0.0538688163 -0.0109966579 -0.2043751214 0.1618732183 0.0183244521 0.0447089709 0.0100453324 -0.0398143219 -0.0083709842 -0.0237074654 0.0307106982 0.0454850191 0.0314503350 0.0549338853 0.0343227798 -0.0531156037 -0.0196740195 -0.0406710673 -0.0365953717 -0.0389050129 -0.0342536979 0.0474575024 0.0721507504 0.0233477147 -0.0141319205 0.0861007249 0.0280884173 -0.0194291768 -0.0206559133 -0.0811346619 0.0378161403 -0.0221555720 -0.0861333127 0.0354492367 0.0217386443 0.0285291877 -0.0341705668 -0.0042496188 0.0102666344 0.0130809663 0.0995631583 -0.0902303229 0.0156438333 0.0083161565 0.0077047616 -0.0019897392 0.1231855876 -0.1079881712 -0.0929628105 0.0854918178 -0.0711880454 -0.0076811320 -0.1151672132 -0.0337608617 0.0716175788 0.0013211269 -0.0040463429 -0.0013537326 -0.0041589986 0.0211855876 -0.0750449040 0.0676837768 0.0030202469 0.0257507288 -0.0493589282 0.0366378019 0.0490150907 0.0178416959 0.0893500355 0.0570721354 -0.0793874055 0.0214422794 0.0760570417 -0.0119869695 0.0552011904 -0.1000009419 0.0118749213 0.0197323578 -0.0328029720 -0.0110886095 0.0641560197 -0.0860222689 0.0872423406 0.0078168742 0.0468428779 0.0560863175 0.0033867669 0.0270183029 0.0635259046 0.0048718206 0.0362304885 -0.0990293878 0.0408791743 0.0845448178 -0.0480698670 0.0057629416 0.0427840399 -0.0522275675 0.0121313315 0.0363910667 -0.1612012187 0.0015490622 0.1092286780 -0.1451335074 0.0025900125 0.1106667441 -0.0186550277 -0.0616660990 -0.0435039404 0.0054979642 -0.0112351554 0.0022033511 0.0000935698 -0.0071686414 0.0032609319 -0.0053320191 0.0110868098 0.0025270702 0.0028448608 -0.0122615542 0.0113010937 -0.0072904404 0.0078968412 0.0016760290 -0.0021042038 -0.0094071623 -0.0001880602 -0.0163049893 0.0067001963 -0.0081499792 -0.0196570669 0.0379248203 -0.0089284864 0.0022719160 -0.0060037259 -0.0036677739 -0.0144677967 0.0416253664 -0.0136015723 -0.0112408922 0.0108741967 -0.0124382865 0.0017102798 0.0083730433 -0.0046471731 -0.0099866007 -0.0080809694 -0.0007940025 0.0035019204 0.0120157412 -0.0082437645 -0.0091851549 -0.0055596456 0.0016167798 0.0021531355 0.0105663132 -0.0001053735 -0.0150562403 -0.0017387012 0.0047821505 -0.0300077639 -0.0329625301 0.0106949646 0.0028664498 0.0046241142 0.0013066392 -0.0243533620 -0.0355133266 0.0131730613 -0.0124839107 -0.0062782065 0.0082499706 0.0065245690 0.0029808550 -0.0032020599 -0.0028731273 0.0007349022 -0.0026895205 0.0042541685 -0.0046768105 0.0010215934 -0.0000274268 -0.0010399387 0.0030455504 0.0001847623 -0.0057425475 -0.0088049012 0.0014810797 -0.0061563872 -0.0110500777 0.0014603387 -0.0145529218 0.0052536597 -0.0101670636 0.0043412085 -0.0033409296 0.0152983037 -0.0175223463 0.0186381269 -0.0011349963 0.0137890838 -0.0047293713 -0.0018523135 0.0091281990 -0.0029401315 -0.0024508788 0.0049459669 0.0082102762 0.0019802351 0.0088536880 0.0129574195 0.0109716917 -0.0042133003 0.0258664586 0.0033826193 0.0066254831 0.0125339562 -0.0000758735 0.0078194502 0.0087802091 -0.0043346145 -0.0067476339 0.0033691188 -0.0020689850 -0.0053415533 -0.0080254668 -0.0014620301 -0.0071901274 -0.0147771586 0.0148553816 -0.0011236439 -0.0286884083 0.0059299459 0.0126981675 -0.0061730049 -0.0123438121 -0.0026381079 0.0043580011 0.0242496858 0.0110995416 -0.0212301846 -0.0070513723 -0.0129775995 0.0045207914 -0.0706225279 -0.0868043212 -0.1369035046 -0.0877381926 0.0109222433 0.0122214036 -0.1353551400 -0.0414539177 -0.0586661626 -0.2368807924 -0.1720108742 -0.2614532430 0.1511720382 0.1031991404 -0.0402615043 0.0627836428 0.1717676671 0.0447953465 -0.0013536645 0.1087914182 0.0456384505 0.3082194073 0.2615307877 -0.0535065177 0.0570858486 -0.1130541139 0.1302513260 -0.0296512460 -0.0660491571 -0.3042753435 -0.0023043020 -0.0780007702 -0.0601888766 -0.1194325733 0.0264021733 -0.0963912310 -0.0206422368 -0.0660045578 -0.0053973457 -0.0264210730 0.0873828942 0.0152650358 -0.1350481539 0.0342907744 0.0966803442 0.0231828239 0.0721866054 0.0664474715 0.0816052541 0.1137030986 -0.1271293882 0.0103729311 0.0569501207 0.3166360626 0.0571292173 -0.1246404887 0.0477437006 0.1006552904 0.0869251202 -0.0603283711 -0.0574483132 0.0024925091 -0.0010159589 0.0025746269 0.0301440611 0.0249773130 0.0059121628 -0.0220621467 -0.0342852876 -0.0168126077 0.0472126583 -0.0219385239 0.0059247468 -0.0203267650 -0.0149806382 -0.0065525966 -0.0261515419 -0.0106271962 0.0102898934 0.0112905400 0.0029582578 -0.0189138659 -0.0083293524 0.0057159423 -0.0088704323 -0.0104564029 -0.0115906349 0.0176117202 0.0080607254 -0.0204390266 0.0097510542 0.0051659575 0.0044861658 -0.0289932087 -0.0072030652 -0.0031964469 -0.0254617600 0.0008096806 0.0139486631 0.0163583527 0.0114224630 -0.0205255190 -0.0070214655 0.0138063993 0.0028616307 -0.0044094827 -0.0119844768 0.0239055764 0.0020434005 -0.0349728610 0.0464199186 -0.0032490075 0.0055168043 0.0166055541 -0.0005719882 0.0022487045 -0.0211903848 -0.0142415925 -0.0064322147 -0.0059445749 0.0042040839 0.0050469844 0.0087521917 0.0188936159 0.0083151914 0.0047888309 0.0008851957 -0.0090915115 -0.0100019827 -0.0093536511 -0.0058858988 -0.0165987624 -0.0123645465 0.0024058159 -0.0096024912 0.0159322824 0.0051179803 0.0167564597 0.0137877222 -0.0059641800 0.0062959774 -0.0168848722 0.0001984840 -0.0204303676 0.0020198226 0.0151862650 0.0223423098 0.0464621745 -0.0368495057 0.0251876406 -0.0418121324 -0.0340998551 0.0233840427 0.0260592885 -0.0246499402 -0.0193942103 0.0192155150 -0.0149238293 -0.0022034270 -0.0257229820 -0.0059011236 0.0147691675 -0.0000800583 -0.0014894351 -0.0001973204 0.0001861344 0.0032453629 -0.0148075603 0.0129182841 0.0017342865 0.0067235001 -0.0091312630 0.0064081767 0.0083008986 0.0049832785 0.0199560103 0.0122895105 -0.0163613004 0.0043116321 0.0159485880 -0.0051503538 0.0124676315 -0.0252096915 0.0024920923 0.0029042248 -0.0022121204 -0.0040842935 0.0151979734 -0.0127207567 0.0089135754 0.0013037932 0.0017374054 0.0166503275 -0.0049285459 0.0048258180 0.0232770108 -0.0009342278 0.0101024654 -0.0152949976 0.0063334541 0.0154119994 -0.0106531310 0.0023412046 0.0114265851 -0.0062172894 0.0011630984 0.0056951392 -0.0346907355 -0.0000708431 0.0239542052 -0.0315631295 0.0000306094 0.0239840323 -0.0029378286 -0.0140626482 -0.0110082903 -0.0360050153 0.0612800169 -0.0247948837 -0.0021222259 0.0390819544 -0.0340281777 0.0381738657 -0.0680602624 0.0026164337 -0.0199386744 0.0758713305 -0.0578730885 0.0265451442 -0.0471085780 0.0073475959 -0.0115478880 0.0419142661 -0.0133587456 0.0743528860 -0.0585132569 0.0294859251 0.1137463467 -0.2295950080 0.0812545434 -0.0077449321 0.0388503440 0.0160555161 0.0878695986 -0.2512314126 0.1077654817 0.0581310174 -0.0939592294 0.0624696071 -0.0020622922 -0.0495202336 0.0508816329 0.0652095189 0.0341049029 -0.0121160846 -0.0258760086 -0.0738294488 0.0351398140 0.0396452181 0.0380084540 -0.0294803897 -0.0300271378 -0.0441389819 0.0224356892 0.0800655285 0.0259561151 0.0024283798 0.1712324177 0.1897313322 -0.0945843631 -0.0181726961 -0.0265320278 -0.0028138725 0.1508407866 0.2051774135 -0.1081729863 0.0680755915 0.0532344354 -0.0192473737 -0.0303356689 -0.0174395529 0.0156949308 0.0182661345 -0.0032688917 0.0132765975 -0.0197953947 0.0211590275 -0.0048289715 -0.0018947796 0.0067931463 -0.0155362829 0.0191392539 0.0267930640 0.0450952436 -0.0096682606 0.0375116071 0.0511750706 0.0025620741 0.0511291552 -0.0176494395 0.0416905787 -0.0295091271 0.0050361563 -0.0760583638 0.0683258900 -0.0805624727 -0.0005801336 -0.0536992276 -0.0191401698 -0.0050863023 -0.0314614260 0.0109361121 -0.0032934958 -0.0279948998 -0.0158864301 -0.0195247989 -0.0316584012 -0.0788720232 -0.0615566004 0.0151879989 -0.0901721459 -0.0189256595 -0.0352746543 -0.0573981399 0.0079063461 -0.0410810936 -0.0550373879 0.0128227760 0.0310884282 -0.0028388108 0.0173244276 0.0269016464 0.0230326954 -0.0044316509 0.0336019501 0.0932205717 -0.0532197647 0.0068732171 0.1061264164 -0.0224910758 -0.0630426360 0.0150663939 0.0509204451 0.0158413012 -0.0071284923 -0.1165505164 -0.0548848894 0.0897057143 0.0088351540 0.0684167235 0.0202752652 -0.0155452250 -0.0185187465 -0.0304566732 -0.0206962109 0.0030735085 -0.0011995922 -0.0271921335 -0.0051379639 -0.0111158936 -0.0517387698 -0.0359739482 -0.0588412088 0.0311937825 0.0203118671 -0.0079956476 0.0116766018 0.0374914228 0.0129142387 -0.0049813207 0.0228403728 0.0116951615 0.0658767508 0.0565001867 -0.0136078610 -0.0122053922 -0.0007692087 -0.0306307021 0.0362904612 -0.0098610677 0.0486587328 0.0105048829 -0.0028529687 0.0081257599 0.0066542731 -0.0090473750 0.0158989404 -0.0027099620 -0.0042667329 0.0070038373 0.0077842505 -0.0036276291 -0.0094263919 0.0093528624 -0.0078455744 -0.0152757477 0.0069526589 0.0061666387 -0.0111457505 -0.0087232666 -0.0022962735 0.0309076083 0.0261849001 0.0072925909 -0.0526552133 0.0028251153 0.0127593136 -0.0218433517 -0.0027645491 -0.0077239006 0.0250826502 0.0049609304 0.0020063574 0.0003533403 -0.0038279769 -0.0015926464 -0.0031955944 0.0005178920 0.0039219157 -0.0000021224 -0.0991246482 0.0679110349 -0.0264994435 -0.0077374838 -0.0354282408 0.0348887924 0.0184477131 -0.0053352446 0.0141483790 0.0125953545 -0.0143970101 0.0019176878 0.0071897999 0.0093548673 -0.0402024534 -0.0008528531 0.0365359647 0.0103830793 0.0067235842 0.0051245919 0.0240086340 0.0138921766 -0.0188474474 -0.0155063635 -0.0225741730 0.0255695212 -0.0610477799 -0.0256928600 0.0578035738 -0.0082999502 -0.0056184276 0.0155923810 0.0167720371 -0.0678272776 -0.0051952309 -0.0132173417 -0.0494710128 -0.0631924893 0.0361540739 -0.0575929083 -0.0691345140 0.0666080896 -0.0988914390 -0.0535640219 0.0388647391 0.0947383256 0.0669226507 -0.0400662668 -0.1678972729 -0.1530289007 -0.1797864289 -0.1408798123 -0.0215448936 0.2382607763 0.2018442944 0.1841543625 0.1982854367 0.1656091297 0.0456931567 -0.2592363451 -0.1957875792 -0.1851490152 -0.0615412758 -0.1926218792 -0.1308032596 0.1058126289 0.2731535498 0.1641332165 0.0784493029 0.2581513097 0.0932007022 -0.1269239282 -0.2274376569 -0.1660540851 0.0246260824 -0.0073589767 -0.0034054625 -0.0006300051 0.0207850554 -0.0391283084 0.0055070514 0.0024838410 -0.0043639902 -0.0153599835 0.0387451836 -0.0397171894 -0.0183288910 0.0367265709 -0.0257562996 -0.0020520339 -0.0363240701 -0.0007034578 0.0123168476 -0.0007911360 -0.0156564813 -0.0016768905 -0.0036026254 0.0115557964 -0.0393522424 0.0371024922 -0.0003071151 0.0117035044 -0.0286577019 0.0166810792 0.0296969470 0.0122739089 0.0332228561 0.0171202020 -0.0199107713 0.0041483322 0.0199831115 -0.0043555708 0.0241076732 -0.0470153438 0.0059784077 0.0107655330 -0.0230176761 -0.0039864105 0.0321971343 -0.0517354906 0.0581936176 0.0134256469 0.0255823925 0.0272044935 -0.0005935182 0.0121856997 0.0154603094 0.0064290506 0.0264935412 -0.0415408660 0.0200928524 0.0302568940 -0.0258562065 0.0127011541 0.0203255072 -0.0471345336 0.0238246210 0.0343487727 -0.0522293923 -0.0030208804 0.0366839269 -0.0475795610 -0.0034035416 0.0349335554 0.0018902143 -0.0259137441 -0.0246754859 0.0010366221 0.0035537546 0.0118782173 -0.0152707042 0.0027291486 0.0240049904 -0.0203902185 -0.0079405693 -0.0127864542 0.0017183739 -0.0081648887 -0.0077267296 0.0149232376 0.0014418613 -0.0194001150 0.0212693874 0.0155834073 0.0147550042 -0.0021351127 0.0112661074 0.0269982248 -0.0095110037 -0.0067622372 -0.0232031285 0.0032366986 -0.0045970642 0.0005886969 -0.0009755272 -0.0026146174 -0.0252129463 0.0105836198 0.0191181780 0.0204559437 -0.0249918655 0.0074754847 -0.0333200952 -0.0266308842 0.0204880317 0.0164716900 0.0030620283 0.0124671388 0.0093994486 0.0212770731 -0.0068941686 0.0283425944 0.0242090410 -0.0232199998 -0.0193340054 -0.0201964182 -0.0097391514 -0.0341892834 -0.0212565891 0.0028848090 0.0353266228 0.0002187012 0.0008347526 0.0008834021 -0.0006489102 -0.0078708630 0.0402209900 0.0018490251 -0.0292331068 -0.0252721823 -0.0029942291 -0.0001946887 -0.0024261292 -0.0011448072 0.0005830099 -0.0002184030 0.0005014914 0.0001023342 0.0015868317 0.0016758884 -0.0000864702 0.0031394392 0.0003518563 0.0027303449 -0.0080283302 0.0029662842 0.0019629540 -0.0042191254 -0.0044059123 -0.0033614820 -0.0011092608 -0.0044333765 0.0001343189 0.0046964345 -0.0021357274 -0.0036357712 0.0078059054 0.0033400711 0.0013350637 0.0143593267 0.0059728582 0.0082911686 0.0006535536 -0.0037387012 0.0010499551 -0.0014966984 0.0150311110 0.0066518224 0.0089882602 0.0010356831 -0.0084997668 0.0003784405 -0.0033982782 0.0001762890 0.0016070819 -0.0062920267 0.0003461420 0.0058369607 0.0016735933 0.0031253551 -0.0032826510 -0.0006563538 0.0002025843 0.0040422207 0.0093064877 0.0021808564 -0.0144846460 0.0012871092 -0.0021159190 -0.0019661171 -0.0037173170 -0.0040377871 0.0014889277 0.0005515563 -0.0012004520 -0.0015929838 0.0019089866 -0.0045339442 -0.0089667418 0.0063302813 0.0018185172 -0.0153990407 -0.0169529919 -0.0226673200 -0.0345101891 -0.0276035775 0.0061399134 -0.0056623257 -0.0303846846 0.0072624282 0.0022869773 -0.0674157215 -0.0396077669 -0.0838249987 0.0351141561 0.0307749127 -0.0123408537 -0.0203745797 0.0408589403 0.0089404996 -0.0065493901 0.0447766419 0.0046656901 0.0893493510 0.0874703613 -0.0215169719 -0.0282075672 0.0321910581 0.0522376313 -0.0108736054 0.1231463992 -0.0483802332 0.0210871946 0.1145309711 -0.0131718754 -0.0488004517 -0.1327268146 -0.0839744138 -0.0803052579 -0.0124479999 -0.0063942625 0.0470775799 -0.0767503308 0.0662829081 -0.0180784104 -0.1474099790 0.0136401599 -0.0624408509 0.0511273527 0.0112478691 0.0346044097 -0.0510609892 -0.0538763135 -0.1602871263 0.0552250043 0.0766213291 0.0191564152 0.0403610027 0.0752514974 -0.0316874514 0.0080513952 0.0371743270 0.0345206986 0.0079899050 -0.0375821146 0.0178813138 -0.0338581289 -0.0075677290 -0.0223481630 -0.0000923689 0.0249344591 -0.0036657919 -0.0052877824 0.0032144367 -0.0051661643 0.0077917416 0.0020019302 0.0012315009 0.0057805193 0.0033410784 -0.0024621250 -0.0046039473 -0.0012148741 0.0046160092 0.0025784154 -0.0024949400 0.0018861946 -0.0000430181 0.0027969418 -0.0097945206 -0.0000946230 0.0025416721 0.0032982299 -0.0039668804 -0.0002370251 -0.0026006123 0.0077173373 -0.0071168704 0.0073693832 -0.0039241333 -0.0043378832 -0.0100417089 0.0012456939 0.0026466222 -0.0029566417 -0.0012287406 -0.0036353779 0.0008811857 0.0001766242 0.0004774388 -0.0010190119 0.0049794107 -0.0029019516 -0.0123966342 -0.0084821453 0.0052790817 0.0134207832 0.0056116806 -0.0035358016 -0.0212829635 -0.0215705708 -0.0183888237 -0.0185094704 -0.0020638467 0.0264277230 0.0210476850 0.0233831245 0.0213413143 0.0163135144 0.0080265924 -0.0283116387 -0.0233779019 -0.0283187234 -0.0020351714 -0.0130925975 -0.0243120108 0.0165002746 0.0337179978 0.0166645522 0.0054302879 0.0270586050 0.0163746767 -0.0111182701 -0.0181441640 -0.0266491898 0.0052962840 0.0012095343 0.0002376956 -0.0079162154 -0.0158855429 0.0098115221 -0.0054490652 0.0248119381 0.0344636419 0.0799475945 0.0003284713 -0.0019354734 0.0004182638 0.0021777488 0.0005970269 -0.0005745251 -0.0016335075 0.0016552562 -0.0006158118 -0.0011561659 -0.0055894014 -0.0004826886 -0.0025284996 0.0028501893 -0.0080211093 0.0084557338 0.0004721380 0.0010773644 -0.0063735534 0.0024848207 0.0068035672 0.0031357895 0.0031434285 0.0014690471 0.0000357155 -0.0001718526 -0.0001136680 0.0032283634 0.0034286533 -0.0021771891 0.0031589579 0.0024304875 -0.0050738020 0.0015521445 0.0088790568 -0.0205216298 0.0198469430 0.0029275075 0.0136705824 -0.0028583325 0.0006844331 0.0013022292 0.0010528357 0.0028485667 0.0102401981 -0.0048469290 0.0034490590 0.0015929189 -0.0049795421 0.0051701688 0.0027293275 -0.0145393238 0.0094739120 0.0107976815 -0.0029054924 -0.0008445016 0.0010774748 -0.0031395334 -0.0009132841 0.0016425291 0.0020998047 -0.0029521983 -0.0047181681 -0.0255122999 -0.0105238235 -0.0443269903 0.1024695943 -0.0089576947 -0.1176585249 0.1237609812 0.0523563084 0.0333819399 0.0148922743 0.0487834526 0.0193325811 -0.0702326184 0.0146951298 0.0970254414 -0.0913408248 -0.0582577917 -0.0365476285 0.0903516226 -0.0409568944 -0.1126932445 0.0878945315 0.0234595894 0.0902141085 0.0006516363 0.0012460137 0.0085245039 -0.0208997452 0.0006705072 0.1252798849 -0.0251406798 -0.0907310408 -0.0628227453 0.1484294459 0.0009816273 0.1400522111 0.0955934672 -0.1533007706 -0.0956122664 -0.0096732175 -0.0001526403 -0.0878543914 -0.1711721108 0.0201411769 -0.1337290956 -0.1217836395 0.1941162395 0.1036999301 0.0481141078 0.0659088549 0.1850935676 -0.0180186940 -0.1844549178 -0.1302508588 0.0114878567 0.0163264599 -0.0042302165 -0.1306708606 -0.1248248188 -0.1386134208 -0.0787161774 0.1640270612 0.1553364704 -0.0191949670 -0.0014270388 0.0069372674 -0.0073079038 0.0038614759 0.0198804965 0.0191678256 -0.0252317083 -0.0114616607 0.0029921318 -0.0115685042 0.0015742895 0.0665071103 -0.0322277865 -0.0092020186 0.0877311895 -0.0288576766 -0.0298192946 -0.0295648977 -0.1310647476 -0.0164921228 -0.0521372315 0.0109481232 0.0605277448 -0.0442395225 -0.1292050124 -0.0949046620 -0.0009358278 0.0938564602 0.0064457843 0.0682036389 0.1281123106 -0.0087744269 -0.0362880805 0.0371353664 0.0092569912 0.0260350236 0.1354923877 -0.0580529950 -0.0465793889 -0.0873978458 -0.0949320538 -0.0657285305 0.0289540236 -0.0387177334 -0.0491123122 0.0230570209 -0.0423951289 -0.0298201859 0.1501805280 -0.0077096614 0.0471221184 0.0071126284 0.0035997343 -0.0673525945 0.1545647669 -0.0014158781 -0.0235223769 -0.1125894534 -0.0434285948 0.0096893210 -0.1009825152 -0.0110171045 0.0593376157 -0.0196566197 0.0564086999 0.0176349188 -0.1011251746 -0.0000458214 0.0139608811 0.0529318553 0.0714581777 -0.0002701840 -0.0005039525 -0.0008175984 -0.0010884378 -0.0005332651 -0.0029370549 0.0009245286 0.0015159758 0.0005889004 -0.0003556195 0.0001520564 -0.0018442531 -0.0017614181 -0.0005028192 0.0004974914 -0.0041611844 -0.0032575193 -0.0018005420 -0.0025676556 0.0008386584 0.0003560780 -0.0000752473 0.0000227055 0.0031095275 0.0591781448 0.0292843586 0.0377631082 -0.1569723587 -0.0390606707 -0.0615979163 -0.0758548205 -0.0592917214 -0.0063591187 0.0387691094 0.1707950189 -0.0094187051 0.0863854869 0.0559355840 -0.0641022243 -0.0887494030 0.0510985527 0.0094253259 0.0064875913 0.1688827074 0.0724753730 -0.0093476810 -0.1270919212 0.0034025052 -0.0586115656 -0.0148265807 -0.0235833174 -0.0131062317 -0.1260764843 -0.0105805530 -0.0321961571 -0.0030795666 -0.0642607169 0.0092989533 -0.0567678933 -0.0690247203 0.0285999321 -0.0037177463 0.0434817101 -0.0279809178 0.0070067720 -0.0192033011 0.0318319977 0.0269211076 0.0125167804 -0.0222163043 0.0175146374 -0.0072360139 -0.0100152998 -0.0049889493 0.0088343127 0.0039786753 0.0051151980 0.0018197388 -0.0012608945 -0.0037069550 0.0008618730 0.0075210356 0.0011846457 -0.0131891629 0.0066857149 0.0127472881 0.0071109476 -0.0055113405 0.0043681951 0.0096464397 0.0003609604 -0.0088904240 -0.0048877813 0.0038195785 0.0072269981 -0.0145271797 0.0103829558 0.0103149821 0.0027472054 -0.0077188490 0.0024673024 0.0068782371 -0.0163504793 -0.0088624737 0.0019554180 -0.0177516345 -0.0134054833 0.0005930246 -0.0214158092 -0.0125107194 0.0084977054 -0.0107532393 -0.0083875331 -0.0001042975 0.0127805500 0.0073077926 0.0014921255 -0.0154577018 -0.0179829554 -0.0251872925 -0.0176350216 -0.0040557289 0.0310087877 0.0226375729 0.0234374100 0.0276998972 0.0235320821 0.0089879631 -0.0356328492 -0.0228100057 -0.0188947510 -0.0077068973 -0.0222415855 -0.0165295365 0.0164954191 0.0298000393 0.0251560730 0.0093497547 0.0281031107 0.0168363172 -0.0260067444 -0.0321093571 -0.0223357747 0.0098501509 -0.0045174216 -0.0061371012 -0.0092238339 -0.0019968600 0.0057685217 -0.0110642277 -0.0216497291 0.0199359250 0.0409601595 0.0040243704 -0.0033102378 -0.0014828383 0.0034381226 -0.0026106138 -0.0001470596 -0.0031281381 -0.0000429051 0.0008911475 0.0000667087 -0.0004776773 -0.0001745840 0.0002188032 0.0001497069 -0.0009351475 0.0011811247 0.0010274596 0.0010311539 -0.0009580415 0.0002933111 0.0005851938 0.0004393499 0.0024641475 0.0013613174 -0.0018273131 0.0003083812 0.0018225141 -0.0005737596 0.0006710632 -0.0019596597 0.0010056852 0.0000735027 -0.0000369491 -0.0003442631 0.0014427667 -0.0004881893 -0.0036121643 -0.0016334877 -0.0031136993 0.0010178037 -0.0036886005 -0.0004787776 0.0065541930 -0.0004058925 0.0043596733 0.0006951131 -0.0000036909 0.0002903618 -0.0017087144 0.0013983285 0.0023141776 -0.0001535918 0.0006939276 0.0008955590 -0.0044706224 -0.0002359595 0.0034122899 -0.0039950620 -0.0000704490 0.0030479902 -0.0002136899 -0.0019828366 -0.0014083663 0.0171052728 -0.0372948732 -0.0667417836 0.1055967586 -0.0455637778 -0.1088590595 0.1028000377 0.1097673714 0.0732532244 -0.0153511335 0.0106371612 0.0746120507 -0.1417319665 0.0250229359 0.1131903811 -0.1431210437 -0.1449239188 -0.0732250644 -0.0056081186 -0.0896183019 -0.1424905439 0.0224734095 0.1586845892 0.1004000828 0.0072280784 -0.0214723440 0.0002838855 -0.0771204666 0.1408251041 0.1022043635 -0.1089369526 -0.1323085571 -0.1158916984 0.1125262997 -0.0372666972 0.1211757729 0.1162763069 -0.0885058308 -0.0390314483 0.0125559508 -0.0469036475 -0.0255040505 -0.0736083752 0.0112409606 -0.1020264168 -0.0755584408 0.0713696827 0.0395055320 0.1092906907 -0.0233494439 0.1214764383 0.0881168200 -0.0469052942 -0.0914835268 -0.0028809627 -0.0030229349 -0.0077507706 -0.0337632056 0.0080403597 -0.1234349330 -0.0109929360 0.0663308599 0.0788402556 0.0292398925 0.0200444361 0.0079473791 0.0083177832 0.0112995763 -0.0080593319 -0.0215989355 0.0110028571 -0.0050299841 -0.0154225056 0.0017544782 -0.0239663418 -0.0673584667 0.0014959323 0.0452635095 -0.0857882667 -0.0006304352 0.0459576150 0.0413321190 0.1203248278 0.0103054928 0.0692568938 -0.0013924831 -0.0616778709 0.0497826580 0.1178494218 0.0107177820 -0.0066080577 -0.0741852607 -0.0604058630 -0.0854710257 -0.1556180059 0.0165963509 0.0466616959 -0.0273080505 -0.0088400523 -0.1154656867 -0.1495354889 0.0170429702 0.0161512534 0.1305234341 0.0464015947 0.1060047500 -0.0035910880 0.0384621329 0.0799109916 0.0091118829 0.0174496988 0.0304546028 -0.1707136319 0.0109140524 -0.0495421980 -0.0283030281 -0.0103163030 -0.0053057837 -0.1664116438 0.0543312271 -0.0012531441 0.1128197732 0.0984149694 0.0136216753 0.1528498274 0.0200546772 -0.0663065734 0.0090948688 -0.0677062306 0.0046082719 0.1532650853 0.0963151634 -0.0365607684 -0.0987251096 -0.0180010202 -0.0013154657 -0.0021489796 -0.0023717909 -0.0019185044 0.0003818042 0.0010359533 -0.0036103508 -0.0001319832 0.0008134605 -0.0060130070 -0.0036631343 -0.0070026127 0.0037280973 0.0050083940 -0.0018325734 -0.0054333301 0.0056926989 0.0006860303 0.0033512688 0.0054150495 -0.0018169686 0.0097475775 0.0116531823 -0.0037798238 0.0341597413 -0.0305707069 0.0119729544 -0.0012719876 -0.0445372039 -0.0499803624 0.0076914879 -0.0478186699 0.0053529080 -0.0186509793 0.0597023669 -0.0425552399 0.0291083303 0.0127841932 0.0411376822 -0.0246158740 0.0161926852 0.0371047238 0.0491044359 0.0490306378 -0.0609827783 -0.0178628110 -0.0418509380 -0.0034849019 -0.0505641118 -0.0213818794 0.0368210985 0.0057360293 -0.0376741144 -0.0965926567 -0.0012712046 0.0066870106 0.0106860868 -0.0053718991 0.0011539194 0.0237856252 0.0038706500 0.0155530970 -0.0238253453 -0.0002949579 -0.0061801049 0.0054817014 -0.0032549638 -0.0029975797 0.0078731601 0.0005284158 -0.0059445422 0.0060023759 0.0049754455 -0.0001914479 0.0018380414 0.0017348570 0.0003508116 0.0014022800 0.0008397755 -0.0009650623 0.0015127476 -0.0009248641 0.0014479475 0.0018621309 -0.0015530958 0.0010424591 -0.0010825947 0.0040516573 -0.0043227424 0.0026747651 -0.0032859354 0.0022852615 -0.0002080512 0.0038177459 -0.0010781209 0.0053018900 -0.0072094185 0.0057753996 -0.0060863571 0.0003191599 -0.0022612043 0.0006849418 -0.0002747687 0.0018701750 -0.0015389455 -0.0000849097 -0.0010970153 -0.0012213339 -0.0000046002 -0.0001094263 -0.0034189265 -0.0018325335 -0.0009181939 -0.0013811952 0.0015886683 0.0013860580 0.0015104838 -0.0007718748 -0.0024013908 -0.0026023064 -0.0035744578 -0.0002862369 0.0032535389 0.0009752076 0.0027061824 0.0028708087 0.0031285583 0.0025135078 -0.0039810534 0.0004248404 -0.0061943186 0.0015693387 -0.0008705494 -0.0037303575 0.0041498217 0.0038761178 0.0007534628 -0.0000556242 0.0054867804 0.0001804691 -0.0026475779 0.0001476819 -0.0066813570 0.0034851437 0.0007575411 -0.0011854449 -0.0021973198 0.0053290444 -0.0088907455 -0.0009375099 -0.0072577005 0.0294549957 0.0629406096 0.0001259303 -0.0006822954 0.0005308732 0.0007972560 -0.0000357726 -0.0000730947 -0.0007433171 0.0007780906 -0.0003707313 -0.0007632888 -0.0028925792 -0.0001506080 -0.0009438132 0.0016068991 -0.0042854879 0.0045883396 0.0006040732 0.0015067589 -0.0029431728 0.0008844939 0.0027760459 0.0012510131 0.0011978068 0.0005460494 -0.0000112921 0.0000050222 -0.0000941777 0.0007726213 0.0027617647 -0.0030176952 0.0012375267 0.0014225783 -0.0027654441 0.0005570107 0.0042878413 -0.0092407682 0.0057214720 -0.0008654066 0.0045617829 0.0013176169 -0.0010769445 0.0010805758 0.0056930785 0.0004849139 0.0053084781 -0.0006515371 0.0010215332 0.0000799282 -0.0029542455 0.0030558309 0.0025041695 -0.0054735520 0.0041880736 0.0047022282 -0.0011807110 -0.0002942266 0.0001074868 -0.0011111260 -0.0003202581 0.0005092252 0.0008677304 -0.0011596517 -0.0018352007 0.0238327794 0.0292383421 0.0790979137 -0.1986777701 0.0346908624 0.1907644516 -0.2173631498 -0.1361714425 -0.0664746803 -0.0163627510 -0.0559463252 -0.0592007718 0.1763175164 -0.0391627142 -0.1776399601 0.1875652956 0.1517209516 0.0592432272 -0.1405719215 0.0775940745 0.2017508963 -0.1346329760 -0.1443926456 -0.1309993231 -0.0070479919 0.0175817371 -0.0154907932 0.1081592978 -0.0918813873 -0.1913110844 0.0978803228 0.1792458099 0.1100670099 0.1751156451 -0.0327155201 0.1540285482 0.1457640384 -0.1579994922 -0.0681513847 0.0124414203 -0.0298759440 -0.0592689675 -0.1552374997 0.0160880848 -0.1436222842 -0.1191368625 0.1562089118 0.0628902586 0.1296619875 -0.0106317998 0.1747794344 0.0678324422 -0.1595672511 -0.1090589874 0.0060337072 0.0095270843 -0.0135707393 -0.1277675074 -0.0603484751 -0.1499901064 -0.0578599046 0.1363900844 0.1140569989 0.0152790360 -0.0100683947 -0.0158386544 0.0025783482 -0.0146770794 -0.0237711706 -0.0144836314 -0.0023129875 -0.0123461663 -0.0091968446 -0.0082115717 -0.0213045964 -0.0102855816 0.0185672859 0.0160557919 -0.0248327184 0.0139446376 0.0219913326 -0.0063429551 0.0543214536 -0.0140127507 0.0300425189 -0.0079569920 0.0098768434 -0.0350273279 0.0611814184 -0.0254154518 0.0145868596 -0.0390729246 0.0361427158 -0.0106909155 -0.0437536362 0.0271099712 -0.0065443930 -0.0130592676 -0.0230304456 -0.0060058933 -0.0454726980 0.0152370586 -0.0415068409 0.0333132512 -0.0527686475 0.0270228180 0.0051439324 0.0256898624 0.0113985132 0.0140003349 0.0227817691 -0.0031205335 -0.0466543993 0.0276798360 0.0034336029 -0.0150625496 -0.0237857185 -0.0011636600 -0.0474159404 0.0051666775 0.0595718084 0.0192464612 -0.0650478230 0.0219468903 0.0492304260 -0.0152807476 -0.0349552678 0.0010313589 0.0118335429 0.0591095638 0.0462030710 -0.0405969676 -0.0261422785 -0.0327303566 0.0287482816 0.0002608988 0.0001831496 0.0002649138 0.0001600444 -0.0001158866 -0.0005737969 0.0003578467 0.0007965654 0.0008090201 0.0004481617 0.0006173482 -0.0001019811 -0.0007382970 -0.0004807409 -0.0000320594 -0.0029153844 -0.0003734556 0.0004014320 -0.0010233385 -0.0003926506 0.0001853464 -0.0001316746 0.0001550768 -0.0003257969 -0.0025759213 0.0022268940 -0.0012475486 0.0007922159 0.0042332416 0.0046254195 0.0010072278 0.0042530402 0.0013380378 -0.0002643696 -0.0036252500 -0.0003083470 -0.0013237076 -0.0001901289 0.0021467416 0.0017052563 -0.0002353008 0.0014831220 0.0003325607 -0.0035029378 -0.0014333074 0.0018490538 0.0039720927 0.0001039129 0.0005952822 0.0011254416 0.0045702047 0.0064110956 0.0039018478 -0.0040816230 0.0028082452 0.0018850771 -0.0036517354 -0.0021308373 -0.0015668455 0.0023547155 0.0006828055 -0.0013588642 -0.0006119685 0.0020023965 -0.0015002015 0.0012637929 -0.0024332360 -0.0006437076 0.0009113072 -0.0355470141 0.1074404780 -0.0373703738 0.0068536371 -0.0112312690 -0.0255174748 -0.0064257770 -0.0175776546 -0.0214141668 0.0046990186 0.0242064032 0.0175137779 -0.0211423878 -0.0104236558 0.0242273651 0.0107430741 0.0038552306 -0.0066838525 0.0209707831 0.0211849988 -0.0176049012 -0.0132669966 0.0008455023 0.0169970520 -0.0063644595 0.0058813006 0.0418956702 0.0037756179 0.0067916012 0.0358627021 0.0191486789 0.0018849960 -0.0251537918 -0.0069259724 0.0079358069 0.0082792258 -0.0273669909 -0.0540653492 -0.0034029042 -0.0047595931 -0.1060226704 0.0228562007 -0.0037880959 -0.0040957944 -0.0252835061 -0.0001058471 0.0134081670 0.0227734774 0.0127135876 0.0079568695 -0.0234890803 -0.0170388160 -0.0034061698 0.0135499912 0.0001068653 0.0001714441 0.0190542723 0.0291147051 0.0094373541 -0.0254584371 0.0099829963 -0.0020153415 0.0012281340 -0.0007296025 -0.0038140170 0.0331810834 0.0212595992 -0.0138232475 -0.0015607010 0.0299803686 -0.0206290719 -0.0425832903 -0.0216862831 -0.0122698518 0.0296110762 -0.0079384741 -0.0031120559 0.0034023134 0.0475315635 -0.0460281798 -0.0001412469 -0.0005584799 -0.0000494374 0.0014902380 0.0403678890 -0.0144783965 -0.0314189474 0.0083909920 -0.0649536557 0.0294559426 -0.0046445368 -0.0363980490 0.0304449595 0.0111231428 0.1381639428 0.0087661032 0.0279903327 -0.0669148725 0.2209767088 -0.1791370592 0.0189273490 -0.0779171723 0.1567104461 -0.0558210218 -0.1495819996 -0.0667951059 -0.0335211522 -0.0184011676 -0.0284440726 0.0102768695 0.0284474872 0.0200016973 -0.1601171334 0.2662375595 -0.0104256074 -0.0618155274 0.1046871649 0.0190207008 -0.1909817228 0.3228921237 -0.2847162433 -0.0765295214 -0.1209769678 -0.2413186409 -0.0517846195 -0.1061697164 -0.0265894329 -0.0293685931 -0.0375655053 0.0737065732 -0.0631942318 -0.0473889347 0.1668783892 -0.1547421156 -0.1569864928 0.2642557498 -0.1986856686 -0.2349357708 0.0011980102 0.0178601236 0.0219916184 0.0177581759 0.0167225930 0.0023361378 -0.0524052489 0.0408780640 0.0893930569 -0.0012504184 0.0008083924 0.0001767191 -0.0000757980 -0.0006430420 0.0008543469 -0.0002344145 -0.0009525523 -0.0007455659 0.0013626072 -0.0006251622 -0.0002708061 0.0013679881 0.0006711385 -0.0007533552 0.0017644977 0.0007043786 0.0012693512 0.0003179401 0.0012338534 0.0004202554 -0.0015217682 0.0024222084 -0.0027954838 0.0000004841 0.0005956998 -0.0002141243 -0.0007317173 0.0021393670 -0.0022611225 0.0018313542 0.0009683311 0.0009499711 0.0036949835 0.0000664349 0.0024242620 0.0019843762 -0.0042391088 -0.0007063321 -0.0007092282 -0.0014425961 -0.0007932953 -0.0052852116 -0.0000286465 -0.0039027046 -0.0032055812 0.0047645322 0.0002631569 0.0061516594 0.0048088882 0.0007117228 0.0046315001 0.0005836034 -0.0035176723 0.0040881797 0.0030547779 -0.0016628639 -0.0032902920 0.0004064631 -0.0050727393 -0.0003332805 0.0070829672 -0.0003867678 -0.0007314407 -0.0005104828 -0.0003516487 -0.0006791013 -0.0002082280 0.0005615630 0.0007123212 -0.0002506600 0.0000482888 -0.0003923905 -0.0004587775 -0.0005110677 0.0016565771 -0.0011677748 -0.0013796730 0.0020890174 -0.0008587119 -0.0014165627 -0.0004671795 -0.0045862731 -0.0008500363 -0.0011370183 0.0001495031 0.0014783636 0.0001462715 -0.0047575998 -0.0015656658 0.0017335116 0.0031157174 0.0010449463 0.0019748791 0.0037568292 0.0001731556 -0.0014382280 0.0011411809 0.0001613056 0.0021435219 0.0037359766 0.0002931584 -0.0011270442 -0.0022778558 -0.0016751723 -0.0017051021 -0.0005336142 -0.0009092990 -0.0013888025 -0.0004794991 -0.0003329638 -0.0002258840 0.0023848365 -0.0005923664 0.0003077577 0.0006951771 0.0004504430 0.0002864323 0.0023494373 -0.0007620666 -0.0009841947 -0.0011095468 0.0000630787 -0.0010391772 -0.0027445310 -0.0000099201 0.0009606139 -0.0000176987 0.0002189760 -0.0018216459 -0.0026735672 -0.0003277168 0.0004389368 0.0020176704 -0.0008276340 -0.0184699166 -0.0250864954 -0.0374341725 -0.0189162287 0.0145046956 0.0389509840 -0.0585375192 -0.0317210674 -0.0246497291 -0.0831898385 -0.0665009855 -0.0755927621 0.0783358735 0.0485096047 -0.0250915466 0.0643362405 0.0600101007 -0.0125536578 0.0442966480 0.0477447339 -0.0057928721 0.1132261223 0.0817600055 -0.0281118792 -0.0001886615 0.0026829482 0.0013623882 -0.0045838217 0.0032480156 0.0009902567 -0.0011451740 0.0024535131 0.0008993963 0.0010568315 -0.0014244723 -0.0006376183 0.0014227155 0.0005217825 0.0007431208 -0.0008325969 0.0015067277 0.0014308368 -0.0034489232 -0.0008203634 0.0017268454 0.0010184420 0.0018255250 0.0016119096 0.0021850953 0.0025790395 -0.0021621439 0.0014746217 0.0014119742 0.0067050923 -0.0007110186 -0.0018925512 0.0005257128 -0.0012049317 -0.0003379390 -0.0016951229 0.0026583511 0.0014774410 0.0013228609 0.0013225468 0.0013284086 -0.0002275763 0.0021263073 -0.0023450510 -0.0030131930 -0.0315032064 0.1795635315 0.1091459075 0.0450544183 -0.0127225025 -0.1707535126 -0.0526609929 -0.0765241573 -0.1281759441 0.0223628916 0.1364842483 0.0843636968 -0.1116436301 -0.0685248573 0.1642176008 0.0584990838 -0.0186449083 -0.0430055898 0.1043375373 0.1099937682 -0.1218932007 -0.0877597220 0.0322743875 0.1002521049 0.0082640158 -0.0095317622 0.2861410690 0.0580849669 -0.0329140750 0.2041771603 0.1206647234 0.0044392893 -0.1414634682 0.0282283744 0.0395625010 0.0833242295 -0.0846904250 -0.1423861714 -0.1236438711 -0.0131726142 -0.2183262798 -0.2008049302 0.0118304600 -0.0577292847 -0.2025390678 0.0143046831 0.0352294721 0.2126033568 0.1542217681 0.0624985177 -0.0836068494 -0.0835746508 -0.0806870312 0.0168994591 -0.1112732157 -0.0455189759 0.0445746749 0.1356623959 0.0957152691 -0.0776924108 0.0840168968 0.0618226660 0.0682688814 -0.0146079819 0.0441858987 0.1768696748 -0.0663244570 0.0033965159 -0.1413301268 0.0093031265 0.0144292753 -0.2710781714 -0.0360363542 0.0039135480 0.2203392359 -0.0391198766 -0.0378538395 0.0147718146 0.0167420247 -0.0286224363 -0.0084029548 0.0000806714 0.0000212694 -0.0002335955 -0.0113607368 0.0198638093 0.0198116209 -0.0038275441 0.0136216057 0.0012257809 0.0088073989 0.0149603091 -0.0168433112 -0.0030808608 -0.0359874253 -0.0015569833 -0.0064660147 0.0164205663 -0.0534262892 0.0412910301 -0.0048722264 0.0190798099 -0.0373835801 0.0114050593 0.0350070659 0.0124340224 0.0024289658 0.0002775728 0.0104559697 -0.0031595564 -0.0115496156 -0.0063053266 0.0379849667 -0.0661156879 0.0014032317 0.0153584741 -0.0287200762 -0.0050176844 0.0442848097 -0.0755842670 0.0645229725 0.0183032607 0.0262967865 0.0628844715 0.0146003938 0.0267633152 0.0031577362 0.0071874416 0.0038499969 -0.0092791695 0.0125655141 0.0048380357 -0.0410794854 0.0411528009 0.0397551493 -0.0634847831 0.0509561817 0.0585223233 0.0076237992 -0.0039301542 -0.0122199503 0.0061350450 -0.0033416522 -0.0086941915 0.0128314431 -0.0058736885 -0.0154713965 -0.0003553329 0.0016307549 -0.0011423373 0.0008477173 -0.0009047162 -0.0001364104 0.0008976490 -0.0010652285 0.0012887720 -0.0000791069 -0.0000695437 0.0011172990 0.0001816984 0.0004723584 0.0003949752 0.0008042651 -0.0013170846 -0.0001332256 0.0005827183 -0.0016058635 -0.0000570192 -0.0023184828 0.0043472885 -0.0014884633 -0.0015891889 0.0001431325 0.0004327506 0.0000400287 0.0041930259 -0.0010775822 0.0008519990 -0.0012660899 -0.0002305431 -0.0009075086 -0.0012435551 0.0003864774 0.0008965141 0.0014874079 -0.0004650622 -0.0004183158 -0.0007786993 0.0006419291 0.0013694823 0.0009368829 0.0001602556 -0.0005493054 -0.0019284001 0.0006190715 -0.0008874254 -0.0014661100 0.0004022929 0.0019250053 0.0026253356 -0.0009616886 -0.0014884650 -0.0011403544 0.0003620772 0.0032428871 0.0043431108 -0.0012209273 0.0003430454 -0.0004150220 -0.0003770026 0.0014540061 0.0004417077 0.0008171098 -0.0007796529 -0.0010806878 -0.0005720762 -0.0002736525 0.0002177707 -0.0002374188 0.0002604649 0.0000867859 0.0000435028 0.0001263257 -0.0021995029 -0.0004513904 0.0017371894 -0.0015037727 -0.0013532961 -0.0002657438 -0.0035726887 -0.0001305514 -0.0012850439 0.0010486381 0.0007378408 0.0021954865 -0.0041805902 -0.0008173084 0.0004178800 0.0028219946 0.0004485632 0.0012987320 0.0021837710 -0.0005788588 0.0002160042 0.0012662491 0.0000045396 0.0004109555 0.0024392275 0.0006400938 0.0011841498 -0.0014413320 -0.0001222069 -0.0022287428 -0.0006939132 -0.0016995622 -0.0005267382 -0.0019399294 -0.0014052465 -0.0004328121 0.0031637596 -0.0007259302 0.0004520219 0.0013897097 0.0003083565 -0.0001880869 0.0031891385 0.0017763176 -0.0026925331 -0.0013518999 0.0015573826 -0.0006333523 -0.0037935157 0.0000689196 0.0023720134 0.0005390240 0.0007294338 -0.0039909607 -0.0035285215 0.0011099889 0.0006019522 0.0030356497 0.0015523053 0.0238262459 0.0164539427 0.0404638599 0.0330867255 -0.0012212837 0.0290657876 0.0228403880 -0.0089975634 0.0154144661 0.0503166880 0.0273684869 0.0651523456 -0.0196066374 -0.0070566337 0.0020196662 -0.0390554904 -0.0306472976 -0.0167275519 0.0157829568 0.0124600801 -0.0285043427 -0.0374714619 -0.0181819500 -0.0111836905 -0.0027703995 0.1300801991 -0.0616243339 -0.1698071968 0.0521920890 0.2146998967 -0.0590680377 0.0309329742 0.0645358444 0.1462904919 0.0161318900 0.0448353333 0.1320990010 0.0656799778 0.0389916604 -0.1035704938 0.1102688571 0.0347181876 -0.1113294336 0.0642525454 0.0158024828 0.0818671436 0.0308251435 0.0597909413 0.0297841102 0.1380335497 -0.0019924839 0.2424783089 0.0111561438 0.1403680533 0.0201623859 -0.0922788068 -0.0734367887 -0.0495711436 -0.0885554142 -0.0278700217 -0.0039786210 0.0121025277 0.0250198687 -0.0321188669 0.0167723005 0.0099034784 0.0300044626 0.0047997321 0.0073758512 -0.0038917954 0.0011094022 -0.0040495495 -0.0007045394 -0.0042698002 0.0080907472 0.0030379231 0.0023660403 0.0035150658 0.0000518714 -0.0045207805 0.0000248979 0.0036425065 0.0018579407 -0.0073355910 -0.0006849798 0.0052141834 0.0020941686 0.0006394814 -0.0052777737 0.0078450289 -0.0005492044 -0.0015535460 -0.0042496793 0.0048569809 -0.0010931829 -0.0071510503 -0.0033656804 0.0079542629 -0.0066156669 -0.0041920780 -0.0032319015 0.0047945993 -0.0055866512 -0.0027236024 0.0002298717 -0.0052634507 0.0002259663 0.0019707513 -0.0081195557 0.0019128201 0.0069787239 0.0007451030 0.0020944105 0.0021598881 -0.0003194179 -0.0016059123 -0.0021407767 0.0002818971 0.0005321027 0.0003898278 0.0032452784 0.0005793497 0.0000545178 0.0008968676 0.0014418327 -0.0000623027 -0.0021352140 -0.0005005122 0.0001019350 0.0023244169 -0.0000756253 -0.0024840821 -0.0004528251 -0.0027642042 -0.0053118556 -0.0017384015 0.0020596672 0.0047383777 -0.0010974887 -0.0009000941 0.0009682941 0.0007348187 -0.0030719094 -0.0018230123 -0.0001922305 -0.0019876838 -0.0042181596 0.0079189132 -0.0023941946 -0.0044350234 -0.0213133061 0.0266845189 -0.0130458056 0.0000814112 -0.0004503252 0.0002590617 0.0000264102 0.0007284590 -0.0009063953 -0.0009846908 0.0006114990 -0.0000914434 -0.0012336675 -0.0021664121 0.0003872893 0.0022707448 0.0004245586 -0.0039835950 0.0022645952 0.0024491948 0.0060426072 -0.0023695357 -0.0009511753 -0.0023358910 0.0009601646 0.0006193732 0.0004710887 0.0001738971 -0.0000918119 -0.0001074670 -0.0072297433 0.0082016061 -0.0184178513 -0.0044943342 0.0006241728 0.0026815428 -0.0040298429 0.0017515531 0.0083251316 -0.0185719563 -0.0042089624 -0.0173547034 0.0253066833 -0.0069988538 0.0032868964 0.0213542511 -0.0030483093 0.0000529123 0.0128324618 -0.0045485674 -0.0021137477 -0.0105330312 0.0087658951 0.0173333006 0.0127315877 -0.0020099078 -0.0023403022 -0.0004855194 -0.0002619610 -0.0000109706 -0.0007431800 -0.0000870562 0.0004170079 0.0007325247 -0.0008253770 -0.0012581236 0.0335465227 0.0081557936 -0.0124497294 -0.0185849043 -0.0506705956 0.0737165775 -0.0724529963 0.0552836639 0.0024734851 -0.0124060166 -0.0769757930 0.0495727664 -0.0146979277 0.0309435902 -0.0507534168 0.0330075424 -0.0666423586 -0.0000909525 -0.0923053278 -0.0352108569 0.0373389221 -0.1122024937 0.1831770184 -0.0766284481 0.0051681670 -0.0372035979 -0.0082911047 -0.0460150870 0.2205722269 -0.1326140090 -0.0280140875 0.0067417830 -0.0208078287 0.0124457225 -0.0690350539 0.0706086691 0.0901151017 0.0185001274 -0.0016399950 -0.0042488668 -0.0783655186 0.0365269663 0.0144371424 0.0371357606 -0.0595880903 -0.0571198785 -0.0529689884 -0.0039433140 0.0748323683 -0.0791626565 0.0397257615 0.1700633188 0.1486097150 -0.0749688112 -0.0153210874 -0.0311535608 -0.0028372540 0.0793007210 0.2007094814 -0.1133791350 0.0016162790 -0.0167014306 -0.0080570149 0.0366563151 0.0190368541 -0.0042244723 0.0028168794 0.0059881361 -0.0271121591 -0.0267604610 0.0265052031 -0.0016086449 -0.0073402532 0.0074303692 -0.0268852320 -0.0408137625 -0.1125643967 -0.0311139287 0.0647669414 -0.0703893443 -0.0585522035 -0.0238824672 -0.1331906895 0.0100599041 -0.0754303703 0.0712204683 0.0260654947 0.1417177152 -0.1729349024 0.0277691093 0.0038907663 0.1186182089 0.0664042566 0.0445113385 0.0682608111 -0.0346234713 0.0331567121 0.0602902340 -0.0069740770 0.0133061496 0.0808833604 0.0806543333 0.1148994646 -0.0605657483 0.0550444895 -0.0762320657 -0.0456245825 -0.0527530408 -0.0025805875 -0.1146435864 -0.0284038614 -0.0140904212 0.0652980420 -0.0229196954 -0.0068127186 0.0614831115 -0.0014753415 0.0295460845 0.0628972810 0.0707892028 -0.0985705967 -0.0104000542 0.0463825058 -0.0291293743 -0.1297068645 0.0022210202 0.0768422750 0.0400579706 0.0194789183 -0.1865853632 -0.1166674974 0.0131963715 0.0217312887 0.1148333652 0.0473126421 -0.0001222751 0.0001060306 0.0001089004 -0.0001195684 -0.0002224709 -0.0005469703 -0.0000536793 0.0009869565 0.0009994765 0.0001653500 0.0007439124 -0.0003273227 -0.0004779025 0.0003305967 -0.0002502630 -0.0025212063 0.0024809375 0.0023785506 0.0001936647 -0.0009030839 -0.0000204161 0.0005536292 0.0018854136 -0.0017116800 -0.0246157425 -0.0336569318 -0.1322435317 0.2352254002 -0.0805217615 0.1280116967 0.0608659203 -0.0382880488 -0.0008990626 0.0357050245 0.0131121632 0.1848508629 0.0131197057 -0.0313139050 0.0216457473 0.0252580942 0.0202064340 -0.0181857716 0.0368385278 -0.0242020751 -0.1908184835 0.0626582420 0.0145078202 -0.0014667373 -0.0149434832 0.0247957889 0.1336383826 0.2347656128 0.0078124730 -0.1433937430 0.0400671626 -0.0349517895 0.0803107683 0.0526368678 0.0207568164 -0.0753930887 -0.0049889158 0.0032211246 -0.0042063579 0.0010373125 0.0038176689 -0.0009187648 -0.0001434071 -0.0056001864 0.0040470307 0.0003112228 -0.0009204660 0.0016188458 0.0013091536 0.0002935696 -0.0008760347 -0.0006424626 -0.0002344712 -0.0005438351 0.0004182951 0.0004236718 0.0002973142 -0.0009130588 -0.0001772561 0.0014638796 -0.0000702811 -0.0009705378 -0.0004459024 -0.0002431262 0.0007763984 -0.0015170648 0.0000957801 0.0000532412 0.0009222157 -0.0003308736 -0.0003693691 0.0019353697 0.0015679753 -0.0023762917 0.0016635570 0.0008431179 -0.0002611577 -0.0010846896 0.0008774376 0.0010116826 -0.0000138883 0.0009581190 -0.0002176351 0.0001649739 0.0015010031 -0.0006364391 -0.0004768007 0.0003599258 0.0001993097 -0.0002897887 -0.0004244678 0.0001357760 0.0000414298 0.0003397228 0.0011193327 0.0003317668 0.0003703086 -0.0001623877 -0.0007928645 -0.0003945311 -0.0011263308 -0.0007163709 -0.0000907122 -0.0005720050 0.0008970034 -0.0002228309 0.0021484960 -0.0002824017 -0.0004079760 0.0010956216 -0.0005538519 -0.0009333087 -0.0008277217 -0.0001286736 -0.0006303019 -0.0006007277 0.0002400663 -0.0001158083 0.0024641764 -0.0005564955 0.0005131811 0.0003707188 0.0001961696 -0.0050313667 0.0015298594 0.0002916099 -0.0004485848 -0.0096481187 0.0060623223 0.0001630568 -0.0001251361 0.0000404139 0.0000134159 0.0000088010 -0.0001390579 -0.0003837772 0.0000279887 0.0000146105 -0.0005279460 -0.0003274639 0.0002627273 -0.0001572705 0.0004063130 -0.0008978445 0.0009670159 0.0003920309 0.0010104894 0.0001145459 -0.0005899852 -0.0005169023 0.0002335119 0.0002074089 0.0000493132 -0.0000175552 0.0000385453 0.0001247211 -0.0003277850 0.0011317045 -0.0014583754 -0.0005512230 0.0004376441 -0.0010385826 -0.0000701254 0.0001262078 -0.0010112229 -0.0017898369 -0.0009091076 -0.0014079397 0.0036760757 -0.0003613080 0.0008317936 0.0036887404 -0.0003977173 0.0004524799 0.0026953458 -0.0009411590 -0.0016725971 -0.0004963188 0.0011233788 0.0010085299 0.0009615238 0.0004185817 0.0000743607 -0.0001300779 -0.0000086951 0.0001774438 -0.0001452574 -0.0000454872 0.0001710961 0.0001299514 -0.0001318078 -0.0002364989 -0.0009247997 0.0117518189 -0.0082898738 0.0412965668 0.0068522807 -0.0069531638 0.0420469315 0.0331850443 0.0062429121 -0.0062031236 0.0024261484 0.0026615301 -0.0527439419 0.0044865650 0.0267793598 -0.0386724209 -0.0287448082 0.0152147807 0.0533581943 -0.0042688721 0.0019945230 0.0536083626 0.0281349010 0.0007469045 0.0041189468 -0.0123618776 0.0081439953 -0.0615947488 0.0016389469 0.0238805747 -0.0411564475 -0.0416808177 0.0319515157 0.0381251824 -0.0165681318 0.0040144642 0.0307960583 -0.0417926544 -0.0107959987 -0.0030417206 0.0055275071 -0.0055808331 -0.0507865784 0.0107553931 -0.0220779462 -0.0301151032 0.0377834057 -0.0082316524 0.0421555621 -0.0158340767 0.0014919452 0.0384474723 -0.0510022193 0.0015880971 0.0047356191 0.0075436418 -0.0083165406 -0.0618819541 0.0071338964 -0.0157923383 -0.0344995280 0.0513831270 -0.0244385132 -0.0020698113 0.0062269668 0.0085055164 0.0084278424 0.0081157609 0.0012087451 -0.0029561580 -0.0048994515 -0.0080989831 0.0061675884 -0.0087330137 -0.0014356971 -0.0304934879 0.1186677544 -0.0379013086 -0.1001736299 0.0580202422 0.0527014953 0.0422406713 0.1751079553 0.0197019206 0.0589160586 -0.0564685783 -0.0949480780 0.0096363915 0.1883187864 0.2330200288 0.0425733932 -0.1413441987 0.0160639108 -0.1172551602 -0.1220548271 0.0027859403 -0.0186087552 -0.0659094684 0.0313575792 0.0114408979 -0.1489138699 0.0771737281 0.0337244122 0.0981028408 0.2378434569 -0.1122343763 -0.0179687570 -0.0511320257 -0.0695596953 -0.0985652578 0.0376075342 -0.0734631504 0.1556367541 0.0042301868 0.0064718625 0.0659343897 -0.0307195385 0.0542071469 0.1423155448 -0.0785966892 0.0066346194 -0.1019099249 -0.2485537873 -0.0135076130 -0.1770796379 -0.0261901888 0.0715836437 0.0302253259 0.0978181280 -0.0408930529 -0.1747371992 -0.2430359827 0.0825926789 0.1187170674 -0.0118281456 0.0000661203 0.0000390207 0.0000498049 -0.0000318900 0.0002847805 0.0002055178 0.0000162216 0.0001989124 0.0002451691 -0.0003276727 -0.0001715923 -0.0002188963 0.0000418630 -0.0000848481 -0.0000364656 -0.0000072794 0.0000716180 0.0001229673 -0.0003706124 -0.0000290639 0.0001892501 -0.0002815682 -0.0002282433 -0.0003448044 -0.0683886401 -0.1190099215 -0.1807217930 0.2567576779 -0.2188879956 0.1607038361 0.0515932949 -0.1648067443 -0.0085731021 -0.0071741323 -0.0460797925 0.0532160427 -0.0380373221 -0.0810566743 0.0629170184 0.0126052432 0.0635193400 -0.0586549848 0.0367536140 0.0201077801 -0.0669241110 0.0896668041 0.1572762370 0.0054705879 -0.0200112431 0.0995436300 0.2011356482 0.2758532659 0.1573611594 -0.1980859327 0.0084757217 -0.0323040591 -0.1638843382 0.0316148162 0.0583579709 0.1708267596 -0.1000690200 -0.0025751026 -0.0043262852 -0.0060782058 0.0456136465 0.0484051862 -0.0208760418 -0.0361414567 -0.0664066383 0.0089069451 -0.0211517981 0.0061055347 0.0112810500 -0.0072604579 -0.0027637940 -0.0014720775 -0.0081236547 -0.0020671012 0.0026131411 0.0078740823 -0.0038361164 -0.0087210890 -0.0001892858 0.0065061501 -0.0049390153 -0.0023764114 -0.0046631638 0.0101940147 0.0052599719 -0.0093885078 0.0050015374 0.0021526096 0.0058434434 -0.0097081416 -0.0002992849 0.0055894954 -0.0050369095 -0.0032960564 0.0118235775 0.0228806613 0.0019576115 -0.0007264899 0.0055038839 0.0045797631 -0.0027005320 0.0103787582 0.0043928757 0.0028153221 0.0104376561 0.0065457250 -0.0000909116 0.0074549858 -0.0013656999 0.0029628679 -0.0065254103 0.0025925441 -0.0051853282 0.0005718870 0.0114577436 0.0051115526 0.0035256548 0.0016099811 -0.0072478263 0.0001236452 -0.0117609085 -0.0066817970 -0.0020816667 -0.0108494099 0.0111358999 -0.0087524802 0.0297452980 -0.0078269272 -0.0228755441 0.0307159907 -0.0154668509 -0.0093228537 -0.0031176971 -0.0018657456 -0.0074491486 -0.0061343018 0.0076659576 -0.0080229320 0.0336609419 -0.0130631679 -0.0029657619 0.0033544187 0.0194390857 0.0363487261 -0.0308593104 0.0137347850 -0.0163739870 0.0053948476 -0.0029590290 -0.0001741912 -0.0005441877 0.0003330366 -0.0001230484 0.0019231948 -0.0016860000 -0.0016691926 0.0005452681 -0.0003905339 -0.0022133715 -0.0026074929 -0.0000644207 0.0170800200 -0.0022826814 -0.0082796561 -0.0021330460 -0.0012451861 0.0228296889 -0.0130721194 0.0033271313 -0.0145748469 0.0020695906 0.0015985944 0.0008977664 0.0002132973 -0.0001986710 0.0000238405 -0.0425178307 0.0541120015 -0.1014539203 -0.0396734795 -0.0004211290 0.0232229337 -0.0231563096 -0.0225692658 0.0872200008 -0.0674222319 0.0012818905 -0.0790847887 0.1368013069 -0.0015320293 0.0241053717 0.0210651822 -0.0077504545 -0.0431863894 0.0374200626 -0.0162855955 0.0192307778 -0.0599829894 0.0326019234 0.0985656684 0.0884725546 -0.0340987102 -0.0321443159 -0.0012207895 -0.0005411868 0.0004449966 -0.0015814462 -0.0001736695 0.0010339182 0.0016224919 -0.0020369683 -0.0025854241 -0.0361591540 0.0000818607 0.0066924298 0.0655458967 0.0178186925 -0.0509084823 0.0873936395 0.0154120680 -0.0175082879 0.0291282406 0.0342286504 -0.0232776757 -0.0447216031 0.0125787997 0.0627511313 -0.0442351651 0.0150944768 0.0434092956 0.1351475594 0.0291332582 -0.0244237088 0.0980833865 -0.0279254515 0.0112774195 0.0105750145 -0.0057400608 0.0112701659 -0.0714200703 -0.0788197435 0.0836525511 -0.0062773088 -0.0247639702 0.0504374029 0.0545666088 -0.0376166396 0.0313044815 0.0694457983 -0.0433657377 0.0006109937 0.0108666342 -0.0220802872 0.0092178752 -0.0513127092 0.0138152874 -0.0501433567 -0.0468377538 0.0168645844 -0.0287943012 0.0840273855 -0.0665265090 0.0184713561 0.0920360628 -0.0216805548 -0.0062638663 0.0052200015 -0.0018591225 -0.0100223352 -0.0643889702 0.0652274827 -0.0496055400 -0.0338024049 0.0268284054 -0.0313286030 -0.0351948149 -0.0046177013 0.0021070013 -0.0061533556 0.0071896170 0.0283604387 -0.0198119976 0.0088480474 -0.0047154154 -0.0026346018 -0.0054979734 -0.0184780341 0.0116078100 -0.0159178478 -0.0127553862 0.0488067412 0.0248287388 -0.0258239121 -0.0461760523 -0.0455751287 -0.0001439022 -0.0574455738 0.0165040047 0.0559031604 -0.0455234958 -0.0460918531 -0.0358774511 -0.0454446471 0.0234774846 0.0629207487 0.0895611264 0.0978878278 -0.0229549195 0.0075498615 0.0140416469 -0.0211422477 0.1202761478 0.0930494176 -0.0226915373 0.0324062900 -0.1257333456 -0.0745840173 0.0535127794 -0.0298823638 0.0308485289 0.0076599145 0.0392129459 0.0185707500 0.0578304140 -0.1281324529 0.0300412156 0.0139951763 -0.0317168110 0.0221069756 0.0744053239 -0.1323525550 0.0114516074 0.1059285059 0.1069426291 0.0617497211 -0.0300076016 0.0762093656 -0.0057831495 -0.0839462636 -0.0077971315 -0.0584717908 0.0104494211 0.0721507003 0.0244604452 -0.0692380213 -0.0194400133 -0.0744852547 0.0002988595 0.0004278998 0.0003316973 -0.0004791455 0.0009082461 -0.0008893065 0.0017561015 0.0022872231 0.0015263732 -0.0000902317 0.0006988303 -0.0004429924 -0.0009112366 -0.0030234014 0.0008287720 0.0012769930 0.0010581577 0.0046603153 -0.0078458915 0.0000094519 0.0027515573 -0.0006103274 -0.0020275904 -0.0012193256 0.0033664770 0.0067276929 0.0111074311 -0.0132579891 0.0142031553 -0.0104379532 -0.0023380149 0.0112430249 0.0003020468 -0.0013211005 0.0017440711 -0.0044041338 0.0006148936 0.0043006169 -0.0039591259 0.0008380719 -0.0061033535 0.0038065793 -0.0002826778 -0.0031986517 0.0040195896 -0.0059331184 -0.0080714636 -0.0009227175 0.0016782256 -0.0080743845 -0.0099476575 -0.0183609474 -0.0077384934 0.0079278427 0.0000289265 0.0045145241 0.0079809672 -0.0007397875 -0.0037635488 -0.0082351292 0.0053374270 -0.0000371615 0.0007480997 0.0012497063 -0.0029509835 -0.0033688510 -0.0001418122 0.0019536607 0.0032137995 0.0000335863 -0.0017575168 0.0018953014 -0.0006877133 0.0003387910 0.0001957939 0.0002436126 0.0003608776 0.0001853042 -0.0001692578 -0.0005308854 0.0002165795 0.0005280163 0.0000457414 -0.0006634323 0.0001239011 0.0001781329 0.0001881816 -0.0005213352 -0.0005189251 0.0006883984 -0.0000098102 -0.0001945674 -0.0003785284 0.0001738048 0.0002689885 -0.0009078887 -0.0001471583 0.0004708659 -0.0011323140 -0.0013721163 -0.0000527778 0.0001974108 -0.0006922829 -0.0000841154 0.0002832363 -0.0004739794 0.0013095536 -0.0002995464 -0.0013359960 0.0031653322 -0.0012455480 0.0000581419 -0.0016710685 0.0007370934 0.0011917913 0.0000504337 -0.0000149147 -0.0012114759 -0.0016325257 -0.0008265109 -0.0003210082 -0.0007003656 0.0012438920 -0.0010524999 0.0035752467 0.0001859192 0.0005230719 0.0014240211 -0.0017451485 -0.0006527476 -0.0031102729 0.0006104110 0.0023027600 -0.0025046393 0.0026062006 0.0047269641 -0.0040709520 0.0009317256 0.0030132584 -0.0002736297 0.0000944061 0.0037775337 -0.0078568442 0.0019147709 0.0000938396 -0.0002032528 -0.0012291533 -0.0017737721 0.0018403207 -0.0006401035 0.0041312711 0.0008354052 -0.0002798983 0.0000509042 -0.0000542934 0.0003956974 0.0000774148 0.0016772648 -0.0014634710 -0.0012366762 0.0013954999 -0.0013716118 -0.0052407744 -0.0028233710 -0.0053288082 0.0634353392 -0.0177706570 -0.0083946491 -0.0148626857 0.0003968634 0.0649650542 -0.0467452354 0.0208806436 -0.0527785789 0.0019587048 0.0016259510 0.0010251340 -0.0000541934 -0.0004578051 -0.0001731643 -0.1445247283 0.1795131218 -0.3327681806 -0.1401910716 -0.0118324225 0.1154405459 -0.0788239902 -0.0870410038 0.3295714859 -0.2217151306 0.0000632724 -0.2548750303 0.4186710206 -0.0107677845 0.0653832950 0.0548463756 -0.0198322939 -0.1297879701 0.1007423202 -0.0485813497 0.0989645116 -0.2149282240 0.1009730000 0.3525861431 0.3283611890 -0.1421938065 -0.1319135031 -0.0021445655 -0.0009369283 -0.0008801081 -0.0016684191 0.0004513596 0.0008611044 0.0020894258 -0.0033527288 -0.0019206342 0.0017218629 -0.0003357872 -0.0001548518 -0.0036002950 -0.0008290806 0.0022067712 -0.0045370363 -0.0012509461 0.0008111422 -0.0013435236 -0.0014177731 0.0010145708 0.0028001562 -0.0007127213 -0.0031636025 0.0024388949 -0.0003482432 -0.0023700332 -0.0070111238 -0.0010997743 0.0008139908 -0.0052017667 0.0005433913 -0.0001842365 -0.0005415495 0.0005617917 -0.0006300661 0.0043175170 0.0033818034 -0.0039570131 0.0008342423 0.0018467991 -0.0031994544 -0.0034355162 0.0018714113 -0.0031489132 -0.0044940393 0.0019139868 -0.0016965657 -0.0016708496 0.0034809805 -0.0017660923 0.0025328978 0.0010572931 0.0033937270 0.0017346166 0.0007884313 0.0035696595 -0.0107352552 0.0005507385 0.0006535400 -0.0065818617 -0.0031431713 0.0017933641 -0.0023319810 -0.0027854114 0.0016375478 0.0016599646 -0.0088034648 0.0051062508 -0.0057179931 -0.0059690274 0.0061826541 0.0016278165 0.0000754232 -0.0001853330 0.0001901617 -0.0004786651 -0.0012943621 0.0037898165 -0.0003110029 -0.0009082133 0.0015941670 0.0012370604 0.0017333216 0.0000224497 0.0023612631 0.0012143579 -0.0036656379 -0.0010270412 0.0019233579 0.0029761349 0.0041582190 -0.0003570081 0.0045435775 -0.0018673701 -0.0033434214 0.0004970370 0.0047558504 0.0008559797 0.0029461879 -0.0025563661 -0.0046103016 -0.0058465811 -0.0066608490 0.0022460850 -0.0012283204 -0.0013832067 0.0012769716 -0.0077766458 -0.0064469576 0.0007262746 -0.0042899742 0.0087401425 0.0028917651 -0.0020848713 0.0026592665 -0.0012618783 -0.0010035176 -0.0004017970 -0.0012352650 -0.0029072769 0.0074248830 -0.0014916968 -0.0001324777 0.0007264854 -0.0008028260 -0.0054848567 0.0078089117 -0.0016047747 -0.0046748341 -0.0063192179 -0.0030464678 0.0011390608 -0.0035693606 -0.0000644895 0.0032819815 -0.0005586746 0.0025762553 0.0007649306 -0.0035162845 -0.0008689333 0.0023910354 0.0005345279 0.0031937848 0.0005540360 0.0006868727 0.0010786031 0.0003746499 0.0002228814 -0.0003263604 0.0013833675 0.0015697199 0.0016123289 0.0012747710 0.0015436286 0.0010627534 -0.0008137424 -0.0021565753 -0.0003015000 0.0017490657 -0.0022533951 -0.0001522938 -0.0058955060 0.0011551203 -0.0004557603 0.0018360174 -0.0030592686 0.0065891232 0.0014620130 0.0011117583 0.0017327186 -0.0019032486 0.0020548106 -0.0027432276 -0.0000780862 0.0015248701 -0.0002210614 -0.0007199497 0.0005446851 -0.0022106407 0.0001616627 0.0010035805 -0.0010040319 0.0001887263 -0.0027458086 0.0007961076 0.0005729474 -0.0011515433 0.0015286540 -0.0006180279 0.0013066146 0.0001130119 0.0023034581 -0.0027979936 0.0007161894 -0.0035150607 0.0015670541 -0.0008654549 -0.0005673136 0.0014857496 -0.0018434671 0.0004634844 -0.0011655314 0.0005129056 -0.0003614718 0.0001457423 0.0010419532 0.0002372241 0.0002297771 -0.0009941844 -0.0002682278 0.0001719487 -0.0003380821 -0.0005722901 0.0004933856 -0.0006795104 -0.0000245791 -0.0005082068 0.0002711410 0.0002036139 -0.0001435779 0.0000223872 -0.0002047806 0.0000561847 -0.0000156036 -0.0000258401 0.0000920099 -0.0003911040 -0.0000156174 0.0003888798 -0.0000026448 0.0001171020 -0.0000857625 0.0002919251 0.0002635838 -0.0002730509 -0.0000032923 -0.0002939010 0.0003743133 -0.0005401787 -0.0002031091 0.0005402150 -0.0001408626 -0.0000153774 -0.0000411133 0.0002057684 -0.0007237092 -0.0001746901 0.0001859414 -0.0004599755 0.0002791189 0.0001324607 -0.0011317672 0.0012585945 0.0004040443 -0.0002427884 0.0001801557 0.0006586016 0.0007228306 -0.0006608205 -0.0004998901 -0.0001218734 -0.0012779950 -0.0000057862 0.0003234948 -0.0000466820 0.0004325848 -0.0016704755 0.0035518947 -0.0005956721 -0.0012040470 0.0019321910 -0.0009395509 0.0042996278 -0.0072738674 0.0015314883 0.0072679439 -0.0095240057 0.0027439976 0.0051947768 -0.0063977153 0.0019500911 0.0033152794 -0.0032691616 0.0011549641 0.0076995959 -0.0118448884 0.0021737034 -0.0000399942 0.0000244178 -0.0001904947 0.0025059874 -0.0015621154 -0.0001101242 0.0053207351 -0.0001692215 -0.0002932882 -0.0012855831 0.0021640186 -0.0024476405 0.0090880528 -0.0035084865 0.0086630457 -0.0216410185 0.0004206970 0.0113452217 -0.0694769376 0.0110447532 0.0564922010 -0.0424154819 0.0783711137 -0.0596324093 0.0578361817 0.0383532397 0.0769536612 0.0715091450 -0.1408484252 -0.0981906549 0.0067094576 0.0100543662 0.0020802189 0.0005543534 0.0007112955 0.0002706506 0.0346513995 -0.1632167103 0.1358141222 0.0485918735 0.0866518328 -0.3606074016 0.0342651945 -0.0012465971 -0.1862002285 -0.1502412684 -0.0667033995 -0.1282341830 0.2784497765 -0.0621675617 0.0498065045 0.2993943456 -0.0361921409 0.0410460429 0.4958701308 -0.1692943105 -0.4147809862 0.0552767741 0.1400835844 -0.0453686800 0.0459650770 0.1214894965 0.0456537793 -0.0079927651 -0.0011861027 0.0040066665 -0.0056028684 -0.0000589324 0.0036207088 0.0072108323 -0.0082873037 -0.0100950321 0.0009617966 0.0003174410 -0.0003691614 -0.0007111945 0.0001895896 0.0009838461 -0.0008937646 0.0001336512 0.0007365956 -0.0010160668 -0.0003698537 0.0003542280 0.0000954276 -0.0003902324 -0.0009462537 0.0000730766 -0.0005270502 -0.0009777332 -0.0017816876 -0.0010310452 0.0009241617 -0.0002896605 -0.0000437538 0.0003944341 -0.0000411376 -0.0002568037 -0.0000740302 0.0012713613 0.0001116967 -0.0005938022 -0.0004155679 -0.0009735254 -0.0001474631 -0.0017646637 -0.0009745258 -0.0042075996 -0.0031621405 -0.0027464206 -0.0024331703 -0.0042177279 0.0023868426 -0.0008186779 0.0007921618 0.0024425948 0.0037432123 0.0002697332 0.0012662786 0.0039794099 -0.0052749318 0.0025293550 -0.0028133080 0.0032894995 -0.0004766629 -0.0009370709 -0.0012896750 0.0013058570 -0.0000892665 0.0024314965 -0.0023736608 0.0034915122 -0.0064565195 -0.0013490371 0.0030976853 0.0006840943 0.0002230382 0.0001384035 0.0003126182 0.0000644674 -0.0006080423 0.0010580783 -0.0028489106 -0.0011372616 0.0013634268 -0.0005411641 0.0026101028 0.0000380980 0.0008817866 0.0008475944 -0.0011195902 -0.0001661013 0.0003776735 0.0002211465 0.0020236387 -0.0001047674 0.0010896707 -0.0003234347 -0.0001766082 -0.0014783818 0.0024197691 -0.0010649991 -0.0002976290 -0.0011829041 -0.0008521568 -0.0012200795 -0.0020225558 0.0010167193 -0.0003359467 -0.0003881362 -0.0000694179 -0.0022668221 -0.0018898175 0.0000152438 -0.0019799212 0.0022426309 -0.0011299250 0.0005054798 0.0014970758 0.0002638111 -0.0010690485 0.0014826845 -0.0010162482 0.0007763793 0.0015374375 0.0000200779 0.0015962094 -0.0012014335 0.0010154387 -0.0021160395 0.0018445765 0.0000070665 0.0010393435 -0.0007126642 0.0024550352 -0.0016586951 -0.0009644428 -0.0008727061 -0.0016642878 -0.0013135173 -0.0011231045 -0.0007762339 -0.0010975096 0.0013179883 -0.0032150839 0.0013373172 -0.0008021256 -0.0012714447 -0.0018221969 -0.0035601712 0.0004603135 -0.0045656670 -0.0041611338 -0.0011870145 -0.0068412653 -0.0087393728 0.0034876800 -0.0015576050 0.0023179069 -0.0026638230 0.0006892250 -0.0002069807 0.0023792660 0.0053435831 0.0030013285 -0.0051382636 -0.0081356497 0.0060807391 -0.0009862851 0.0026665936 -0.0011466331 -0.0645358373 -0.0552417711 -0.1023833867 0.1291897923 -0.1025317290 0.1027775928 0.0207956848 -0.0728131001 0.0055321705 -0.0066724148 -0.0128223319 0.0356972829 -0.0139348029 -0.0366401540 0.0758989571 -0.0441659923 0.0545759266 0.0579131069 0.0289148277 0.0339494357 -0.0963036473 -0.1014649610 -0.1814181921 -0.0302575318 -0.1272221738 0.0267554814 -0.1796881471 -0.1406203853 -0.1806068937 0.0237443668 -0.0130185747 -0.0005212607 0.1874521941 0.0131898814 0.0289741542 0.0373639459 0.0409354198 0.0606154854 -0.1051696907 0.0207262172 -0.0392590541 0.0035549682 -0.0165842952 -0.0094430834 0.0344875482 -0.0001256339 -0.0016305443 0.0083964461 0.0000567888 0.0053965613 -0.0008430884 -0.0006252783 0.0035936987 0.0003488302 0.0004489003 -0.0042415968 0.0032225162 0.0022055797 0.0005468845 0.0016218638 0.0012457603 -0.0031227908 0.0000782755 -0.0073228971 -0.0017916233 0.0006938739 -0.0019727302 0.0004100369 -0.0011950523 0.0041725788 -0.0011307807 0.0028361225 0.0054754475 -0.0062403848 -0.0053510836 -0.0079105370 -0.0031136074 0.0002585147 0.0014073851 0.0026722636 -0.0004749640 0.0005645995 0.0008527618 -0.0018800420 0.0013681712 0.0013584557 -0.0050725217 -0.0140994821 0.0167500140 -0.0055768153 0.0101884571 -0.0113747022 0.0049512731 0.0060942211 -0.0156296569 0.0019056099 0.0066632805 -0.0124955720 0.0043104963 -0.0190055792 0.0282930180 -0.0053819433 -0.0178087642 0.0299759532 -0.0088691099 0.0765448411 -0.1153578443 0.0338465894 0.0812422539 -0.1034931307 0.0347780812 0.0311725790 -0.0403401695 0.0055993850 0.0324483304 -0.0385696805 0.0083027443 0.0865704812 -0.1282102688 0.0330210400 0.0034269379 0.0024255679 -0.0080882228 -0.0054062051 -0.0123708673 0.0013194400 -0.1115218689 0.1267331024 -0.0530293992 0.0005458420 0.0008149508 -0.0010238487 0.0023085093 -0.0050588122 0.0045121726 -0.0007110880 -0.0005931536 0.0010876925 -0.0047360992 0.0022851764 0.0046518158 0.0025370908 0.0073416923 -0.0031130468 0.0006401078 -0.0000430122 0.0047364844 0.0044733288 -0.0071410651 -0.0088791347 -0.0010911053 0.0004780824 -0.0008274455 -0.0008023028 0.0006713666 0.0006434557 -0.0070104733 -0.0094612880 -0.0059818821 -0.0047553077 0.0090624537 -0.0341276741 -0.0003839032 -0.0124424554 0.0132354024 -0.0112071492 -0.0003488938 -0.0151483924 0.0334149449 -0.0049376382 0.0035663905 -0.0040848106 0.0014089373 -0.0057019295 0.0287779834 -0.0107816202 -0.0187309844 -0.0011005368 0.0072372631 0.0056894566 0.0173293477 -0.0025636071 -0.0062409829 -0.0009762548 0.0005550863 -0.0002364004 0.0004695171 -0.0001077777 -0.0003201439 -0.0003290693 0.0000796186 0.0017180865 -0.0486350632 -0.0044039195 0.0099464219 0.0312616300 -0.0124262672 -0.0407863127 0.0357495108 0.0003566435 -0.0380405043 0.0464610811 0.0169644497 -0.0172667451 -0.0146457361 0.0273474436 0.0471383616 -0.0053815744 0.0175174511 0.0549123553 0.0960376732 0.0134490600 -0.0216586829 0.0125276952 -0.0082930646 -0.0107718192 0.0175523219 -0.0088952039 0.0031517776 -0.0700590904 -0.0163671399 0.0379934415 0.0331097584 0.0136266543 0.0265606244 0.0089118522 0.0485827487 0.1609217527 0.0382057467 0.0909789025 0.1274769867 0.1385171744 -0.1049234277 0.0408359146 0.0712402919 -0.0637672791 -0.1114543752 0.0258031488 -0.1196957718 -0.1132365709 0.0745511425 -0.1683188940 0.1499018021 -0.1309314811 0.1072868011 0.0243823457 0.0017443716 -0.0605339782 0.0187738350 -0.0501722759 0.0456611562 -0.0620487351 0.1212762888 -0.2515184640 0.0557476941 -0.0339352833 -0.0065227435 -0.0111474492 -0.0162170781 0.0042024139 0.0308912252 -0.0679029591 0.0763033814 0.0528359915 -0.0640972401 0.0372731502 -0.0853695148 0.0142616113 -0.0150964318 -0.0092221944 0.0219228166 0.0204349764 -0.0161359276 -0.0142702807 -0.0458317302 -0.0117447902 -0.0181920566 0.0002956434 0.0226429253 -0.0072154195 -0.0483934474 -0.0242094837 0.0135818977 0.0239632136 0.0319695819 0.0463960122 0.0622789192 -0.0101073517 -0.0068904107 0.0069599551 -0.0092463592 0.0871935279 0.0551344877 -0.0011449534 0.0148561392 -0.0660560225 -0.0224809141 0.0194174423 -0.0200801057 -0.0310733788 0.0216997694 -0.0193796483 0.0706714409 -0.0530199714 -0.0417718153 0.0328306704 -0.0332670490 0.0186153910 -0.0677231631 -0.0002188791 -0.0471714662 0.0352321600 0.0178367189 -0.0220875559 -0.1957766993 0.1101374300 0.0765617307 0.0146245377 0.0501681187 0.0362558620 0.0935673030 0.1772596910 0.0743506700 -0.1473541660 0.1327764613 -0.1000019134 0.0747811672 0.0002777859 0.0000015267 -0.0003908808 0.0009619407 0.0001433897 0.0016363984 -0.0012359012 -0.0021914955 -0.0019806623 0.0000958504 -0.0013147728 0.0008168082 0.0006822060 0.0012152277 -0.0020024172 0.0017649145 -0.0024545917 -0.0060372933 -0.0025684798 0.0003049653 0.0007306623 0.0012675924 -0.0018715739 0.0042282017 0.1271992215 -0.0303644723 -0.1918580891 0.0887659720 -0.2348861151 0.0249011524 0.0447056942 -0.2242175067 -0.0249681689 -0.0235977079 0.0378481025 -0.0998153848 0.0576123827 0.0359076286 0.0701470780 0.0001619813 -0.0396491989 0.0723880990 0.0003315107 -0.0147891074 0.0370256586 -0.0391957186 -0.0521295254 0.0049194980 0.0476505008 -0.0626191458 -0.1061416217 -0.1534658261 -0.0513976247 0.1114579780 -0.0070030855 0.0294761978 0.0349464263 0.0142512411 0.0127995314 0.2011216802 -0.0277089797 0.0629157088 -0.1133604494 0.0121094445 -0.0100408985 0.0340275192 -0.0329258654 -0.0315303164 -0.0029236955 0.0096907975 -0.0673278181 0.0504587657 0.0079904961 0.0075036031 -0.0030343435 -0.0003696936 0.0000149027 0.0019772525 0.0023765080 0.0020245940 -0.0008575336 -0.0051480865 0.0020817605 0.0105315901 -0.0019904505 -0.0035747211 -0.0023520004 0.0056825002 0.0006069557 -0.0053046222 -0.0007438910 0.0018804013 0.0048339265 -0.0041844754 0.0035174973 0.0121086181 -0.0057252213 -0.0006677626 0.0003598545 -0.0003318210 0.0078470731 -0.0090951373 0.0017878342 0.0115989907 -0.0097112690 0.0101670406 0.0004455458 0.0006149107 0.0058561474 0.0156595081 -0.0132081890 -0.0025645190 0.0058190732 -0.0012134986 0.0005006854 -0.0006517428 -0.0005285284 0.0013604283 -0.0014786184 0.0026685091 0.0003646524 -0.0007508129 -0.0014320568 -0.0083942712 0.0081732591 -0.0047276378 -0.0077215049 0.0081049892 0.0010965300 0.0276378806 -0.0367881940 0.0106542053 0.0343724738 -0.0445450590 0.0136173859 0.0238436312 -0.0381084822 0.0054787857 0.0200920998 -0.0292697637 0.0110111757 0.0428742284 -0.0527556325 0.0117205779 0.0002038291 0.0005890459 0.0028279390 -0.0017171663 -0.0245300149 0.0072473990 0.0405294675 -0.0273596759 0.0131461640 0.0024177785 -0.0023050180 -0.0009206140 0.0074203743 -0.0119215501 0.0064869213 -0.0021615978 0.0020276770 -0.0016129071 0.0001755886 0.0006790006 -0.0018647650 0.0012898246 -0.0038246939 0.0050250360 0.0004168342 0.0025310934 -0.0032985823 -0.0003665345 0.0044922456 0.0000644760 -0.0022411250 0.0022444074 -0.0013388920 -0.0019511081 0.0008447032 0.0016405801 -0.0001552998 0.0013183401 0.0012156631 -0.0010804065 -0.0042097791 0.0156399013 -0.0003272123 0.0000228011 0.0068844086 0.0023106878 -0.0051597819 0.0084443827 -0.0155060347 -0.0036421744 -0.0054315703 0.0094676285 -0.0004851568 0.0093508127 -0.0153541893 0.0044617079 0.0152573606 -0.0011640773 -0.0072937866 0.0018724108 0.0065511880 -0.0098428375 -0.0078585862 -0.0040938678 0.0005340084 0.0035313703 -0.0009877325 -0.0004378021 0.0009185552 -0.0008621821 -0.0007461036 0.0017263964 0.1410422620 0.0941422065 -0.0700828621 0.0113936434 0.0694778226 0.1589865178 -0.0052075545 0.1098337906 0.1253011802 -0.1642935235 -0.0589710762 0.0519554148 -0.0900287553 -0.0576034275 -0.1011318443 -0.0575989407 -0.1214114795 -0.1005262724 -0.1052088386 -0.1305774813 0.1750601548 0.1561179886 0.0654083943 0.0282099615 -0.0222648567 -0.0625226416 0.0155560821 0.0568118722 0.0252669658 -0.0650513855 -0.1778778815 -0.2027099245 0.0794414260 -0.0317273987 0.0046335990 -0.0471924803 -0.0413338472 0.0050860277 -0.0358178555 -0.0418682637 0.0321623697 -0.0150052809 0.0168615015 0.0111067248 0.0530501498 0.0140252617 0.0136307690 0.0547625040 -0.0703470151 0.0699519434 -0.0340109189 -0.0133476583 -0.0054974414 -0.0120632555 -0.0094771777 0.0110790121 0.0017954413 0.0702439287 -0.0341886367 0.0307802972 -0.0070951133 0.0461773057 0.0141275807 0.0945273749 0.0518677325 0.0513263191 0.0631550665 0.0238167449 -0.0941130806 0.0278191161 -0.0215756751 -0.0119429233 0.0175871880 -0.0041073718 0.0310989364 -0.0232829407 -0.0122992348 0.0747909907 -0.0243066388 -0.0104269520 -0.0359933710 -0.0857161269 0.1055715071 0.0113382416 -0.0383125692 0.0540512886 0.1011608993 -0.1539522107 0.1216310626 -0.1573993060 -0.1607816532 -0.0508091002 0.0877318255 0.0474073798 -0.0487529767 0.0343697094 0.0372236961 0.0069199381 -0.0737407814 -0.0001284327 -0.0377500258 0.0395405769 -0.0265643699 -0.0302029579 -0.2099455003 -0.0106158725 0.0244329023 -0.0117502183 -0.0157201860 -0.0047246317 -0.0098827813 -0.0187633465 0.0628867006 -0.0069495404 0.0096612171 0.0018011951 -0.0066965236 -0.0597548256 0.0685422244 0.0030034867 -0.0286723499 -0.0482344530 -0.0140728374 -0.0015756050 -0.0389920580 -0.0122071763 0.0122429296 -0.0068839045 0.0174092149 -0.0055630896 -0.0391681160 -0.0187356309 -0.0091345303 0.0221037943 0.0288094698 0.0001065210 -0.0012266022 -0.0017560593 -0.0022428858 0.0020918851 -0.0015085353 0.0002094519 0.0029487996 0.0023171964 -0.0043973738 -0.0025612371 -0.0065173396 0.0008811255 -0.0001122240 -0.0015174441 -0.0009628356 0.0019166298 0.0007163088 -0.0054381349 -0.0003375914 0.0024811578 0.0022092104 0.0006760068 -0.0014755717 -0.0015194297 -0.0012937228 -0.0000797553 0.0014638937 -0.0010813568 0.0001292928 0.0000953879 -0.0007102903 0.0001135673 0.0003233618 0.0002703203 0.0011735104 -0.0000973120 -0.0009536767 0.0007094094 -0.0021159337 0.0010195761 -0.0001023057 0.0002132112 0.0016006544 -0.0020159683 -0.0000771241 0.0005759695 0.0001905868 -0.0005029095 0.0011460648 0.0001676143 0.0008117361 0.0005992521 -0.0009437408 -0.0020257726 -0.0019977996 0.0007515798 -0.0000324262 0.0006762879 -0.0010420108 -0.0003552661 0.0005949267 0.0002165232 -0.0001752733 0.0006218969 -0.0006862048 0.0004986710 0.0001481009 0.0000738875 -0.0028747849 0.0253061364 -0.0222450190 0.0009761420 -0.0032888475 0.0019286958 -0.0008683354 0.0003515601 -0.0005642178 -0.0002508855 -0.0005479811 0.0004592261 0.0005477760 -0.0001958153 -0.0008781158 0.0005977521 0.0005934360 0.0004923654 -0.0014581406 0.0005630610 0.0005210004 -0.0004657396 0.0000163862 -0.0009753707 0.0039924705 -0.0035814640 0.0010130435 0.0043257439 -0.0024986268 0.0022960197 0.0006004578 -0.0024074844 0.0011998200 0.0013738216 -0.0025606840 0.0009724036 -0.0007401796 -0.0043409043 0.0024507448 0.0035239393 -0.0165296283 0.0116603556 -0.0056149886 0.0090526521 -0.0020557615 0.0039530991 -0.0068855018 0.0009097079 0.0052676022 -0.0066242720 0.0018274412 0.0054166194 -0.0064814390 0.0017726063 -0.0074622846 0.0119688563 -0.0027242998 -0.0096058455 0.0122370856 -0.0029578648 0.0359760615 -0.0480908563 0.0124083945 0.0330392834 -0.0488527219 0.0091642877 0.0073239941 -0.0099959847 0.0041073971 0.0086623990 -0.0131772634 0.0029603351 0.0357560565 -0.0527728400 0.0118545140 0.0001666141 0.0015932671 0.0003745297 0.0185403844 -0.0144563479 0.0000752783 -0.0000060146 -0.0002566480 -0.0001214480 0.0041354365 -0.0080541316 0.0061791845 -0.0224759113 0.0324047393 -0.0307757557 -0.0035645119 0.0052105443 -0.0102429042 -0.0401607450 0.0096675230 -0.0568355389 -0.0404020728 -0.1104751267 0.0843409505 0.1260939788 0.0814473670 0.0164140102 -0.0364603504 0.0056209465 -0.0293787242 0.0028482986 -0.0090183084 0.0052392738 -0.0002996112 -0.0011409006 0.0006998015 0.1188578697 0.0862554188 0.1781699923 0.1098071201 -0.1363933117 0.5093284352 0.0180725747 0.1884078908 -0.1930088918 0.0178421853 -0.1490158611 0.1030730853 -0.1421791772 -0.1330036511 -0.0519510295 0.5203367437 -0.0438151952 0.2840888124 0.0836466557 -0.0329445245 0.0189364021 -0.1241915076 0.0825376768 0.1797693701 0.1359768267 -0.0409117106 -0.0495791012 0.0062852849 -0.0003894691 -0.0065252915 -0.0024072211 0.0014989104 0.0022571495 -0.0027561467 0.0022743132 0.0007140081 -0.0026444874 0.0003654569 -0.0000183775 0.0003558075 -0.0013678523 -0.0014524994 0.0001026673 -0.0001891023 -0.0018965764 0.0023425107 0.0004053542 -0.0005287100 0.0000917163 0.0019483965 0.0014315899 0.0006506959 0.0009679513 0.0021586254 0.0034746816 -0.0023787769 0.0001736258 -0.0014350609 -0.0005270451 -0.0002779290 0.0013540870 -0.0016442374 0.0000046670 -0.0013549459 -0.0013734871 0.0019723069 0.0044136165 -0.0023303872 0.0022885556 -0.0004692390 0.0004200391 -0.0017226408 -0.0043550273 -0.0060439753 0.0015250592 -0.0012856907 -0.0004969000 0.0003384034 -0.0004050061 -0.0026491970 0.0021992547 0.0017856745 -0.0006353577 -0.0001077264 0.0087798339 0.0131298394 -0.0075979716 0.0071744379 0.0087546893 -0.0054588194 0.0050313223 0.0103995517 -0.0019764204 0.0065793134 0.0044996978 -0.0023303077 0.0080372100 0.0075979475 -0.0046707584 -0.0015022121 -0.0000577071 -0.0009676120 -0.0011688681 0.0005032116 0.0013453947 0.0002405872 -0.0022906043 -0.0000011308 -0.0024457418 -0.0023823152 0.0013922490 0.0003735114 -0.0002671460 -0.0006508120 0.0005322814 0.0006841425 -0.0000233874 0.0003499938 -0.0015957999 -0.0002968782 -0.0000656981 -0.0004449536 -0.0003138006 0.0010648627 -0.0017724024 0.0008428078 0.0015619080 0.0008077921 0.0001054334 0.0004465738 0.0015403991 -0.0004790557 -0.0005233539 -0.0000111359 0.0004084237 0.0019272721 0.0012695568 -0.0000284807 0.0004910017 -0.0010972073 0.0014138102 0.0010952006 -0.0000442859 -0.0000791897 -0.0000900863 0.0006547610 0.0006064938 0.0006692638 -0.0017249140 0.0014230345 0.0010793773 -0.0008283510 0.0001814683 0.0008300654 -0.0018198325 0.0004773604 0.0034487939 0.0010991386 -0.0009111668 0.0001054829 0.0012600361 -0.0004234955 -0.0013633076 -0.0001551731 -0.0000180735 0.0018934281 0.0011099138 -0.0014403284 -0.0009192599 -0.0001546909 -0.0008090787 0.0018089726 0.0028791388 0.0055702210 -0.0004660564 0.0059604890 0.0056098735 0.0027128698 0.0119589056 0.0144256260 -0.0054670309 0.0032873300 -0.0043291885 0.0003754437 -0.0013010925 0.0000879152 -0.0106446936 -0.0051749072 -0.0014583917 -0.0009002667 0.0078125735 -0.0037211992 0.0043808931 0.0029913539 -0.0000004855 0.0045084933 0.0029444395 -0.0087594433 -0.0029106061 -0.0071768425 0.0222817138 -0.0029549253 -0.0066029573 -0.0009805735 0.0036579000 -0.0007883571 0.0062735633 -0.0041842802 0.0065354801 -0.0042050859 0.0067264429 0.0072100869 -0.0032728216 -0.0028158748 0.0011315891 0.0046345442 -0.0052703149 -0.0187297641 -0.0044289993 -0.0135585387 0.0042486522 -0.0126280173 -0.0042874592 -0.0199394440 0.0139782814 0.0097864472 0.0064142490 0.0116487855 -0.0043623752 0.0024937911 0.0079352820 0.0043971856 0.0024344046 -0.0073020508 0.0015458535 -0.0047388350 0.0024348302 -0.0014945896 -0.0002982355 0.0046036893 0.0089745000 -0.0872030633 0.0785355133 0.0004633745 0.0122259579 -0.0093427003 0.0029237356 -0.0021158824 0.0003269217 0.0021528122 0.0048918027 0.0000849870 -0.0059026560 0.0006096357 0.0100119943 0.0000100149 0.0006648030 -0.0020009519 0.0082870898 0.0028474648 -0.0045313194 -0.0008382970 -0.0010970016 0.0078778082 -0.0165039994 0.0188463661 0.0067501127 -0.0109355393 0.0094075515 0.0002987442 0.0062365833 0.0073802225 -0.0049739263 -0.0030183943 0.0077742247 -0.0079839930 0.0016545038 0.0013850655 -0.0046584092 -0.0071561330 0.0255489739 -0.0230619371 0.0554913404 -0.0852612536 0.0201451463 -0.0297892537 0.0445855265 -0.0084931255 -0.0323986361 0.0472072954 -0.0124736011 -0.0475417732 0.0654762927 -0.0161470549 0.0676052762 -0.0963638703 0.0257986800 0.0757862681 -0.1051220632 0.0244144474 -0.3094737225 0.4270064168 -0.1163431811 -0.2415294869 0.3438429226 -0.0787043560 -0.0777222738 0.1152467105 -0.0290467948 -0.1199840047 0.1657944281 -0.0399154393 -0.3169745207 0.4551780586 -0.1063539124 -0.0027776398 -0.0081937992 -0.0025710987 -0.0676864496 0.0505301130 -0.0026774162 -0.0335112403 -0.0067924416 0.0053874836 -0.0000093269 -0.0018230731 0.0001269847 0.0078463657 -0.0069608758 0.0030358203 -0.0043865261 0.0046484783 -0.0039471178 -0.0087807986 0.0024666729 -0.0083675909 -0.0052052525 -0.0120676581 0.0125045872 0.0196339967 0.0056727688 0.0071275363 -0.0039817352 -0.0024744438 -0.0071484393 -0.0002863585 0.0036589279 -0.0002447782 -0.0006856362 -0.0004504949 0.0001858137 0.0135811075 0.0034528661 0.0274141581 0.0128146853 -0.0147474500 0.0496754933 0.0021052339 0.0136817785 -0.0157308175 0.0114008900 -0.0117512627 0.0128771844 0.0059462191 -0.0041732126 0.0044807499 0.0596489026 -0.0066644077 0.0201040082 0.0234981669 -0.0091763223 -0.0059258143 -0.0185645759 0.0156568336 0.0279739647 0.0239184532 -0.0047219129 -0.0075769676 -0.0042898030 -0.0006466025 0.0061005465 -0.0021218508 0.0001162960 0.0016288676 0.0003065399 -0.0021629018 -0.0028099236 0.0232081923 -0.0213122629 0.0116049644 -0.0012874053 0.0170439368 -0.0006668266 0.0102863471 -0.0133898113 0.0153892373 -0.0157243425 0.0072338825 -0.0030477087 0.0019605428 -0.0256666218 -0.0009967046 -0.0121909698 0.0014504083 -0.0164822960 -0.0374281690 0.0734544603 -0.0339484660 0.0135691952 0.0032511810 -0.0027618465 -0.0157077495 0.0385536650 -0.0013293978 0.0019809496 0.0034017736 -0.0114916772 -0.0578180507 0.0658026292 -0.0418107722 0.0086497671 0.0183064905 0.0129143062 -0.0092697781 -0.0067693182 0.0250669084 0.0258686962 -0.0024609975 -0.0004107251 -0.0063511818 -0.0265981826 -0.0097566702 0.0116318142 -0.0048422347 -0.0246981652 0.0615512772 0.0475246322 -0.0161125196 -0.0205592876 0.0113192312 0.0029685486 0.0218115874 0.0243680655 -0.0046186171 -0.0129051730 0.0041627388 -0.0103037855 0.0683307323 0.0330242274 -0.0319815885 0.0078919200 -0.0081557169 0.0086965361 0.0110758093 -0.0101155447 -0.0052622496 -0.0134013498 -0.0002058615 0.0110651686 -0.0152434618 -0.0044252774 -0.0089402091 -0.0050662411 -0.0061162096 -0.0012164385 0.0045571852 -0.0050116854 0.0003267613 -0.0040742039 -0.0026976792 0.0046375255 -0.0083476015 0.0071992392 0.0030869308 0.0042664797 -0.0046578117 0.0002720952 -0.0138424102 0.0029152745 0.0015488253 0.0047274113 0.0011466414 -0.0051507551 0.0096471159 0.0031694555 -0.0024250506 -0.0042163151 0.0033606180 -0.0052957402 0.0125068286 -0.0077720212 -0.0049682379 -0.0060247214 -0.0042099371 -0.0008625156 0.0043740495 -0.0092242701 0.0008300430 -0.0070636499 0.0021631337 -0.0059728153 -0.0116171114 0.0079579886 -0.0052523357 0.0037407248 0.0013699940 -0.0041430233 -0.0197037461 -0.0055311489 -0.0102508268 0.0083315426 -0.0012053661 0.0065468139 0.0152358787 0.0060497243 0.0069458147 -0.0006841369 -0.0000555247 -0.0014181185 0.0222109743 -0.0070888462 0.0067366999 -0.0010804259 -0.0022133723 -0.0026430626 -0.0033159001 -0.0010927695 -0.0061202173 0.0003912256 0.0023606375 0.0013900820 -0.0027960127 -0.0014879397 -0.0061328388 -0.0012927750 -0.0023953008 0.0026484930 -0.0022864871 0.0104729837 0.0153294072 0.0042181056 -0.0108421669 0.0033625689 -0.0060447285 -0.0010956717 -0.0066062245 0.0030628890 0.0035499777 0.0084840516 -0.0308996237 0.0001697613 -0.0199512248 -0.0069984139 -0.0056345974 0.0050002816 -0.0060672968 0.0068303484 -0.0072389396 0.0111289431 -0.0022334510 0.0094135617 0.0292399069 0.0320258557 -0.0488728543 -0.0343163048 0.0132916907 0.0366072947 0.0185674249 0.0025887255 -0.0053060450 -0.0106760322 0.0276157273 -0.0039801654 0.0268122230 -0.0036185446 0.0887198024 0.0197631021 -0.0018452620 0.0216087237 0.0055825942 0.0010011316 -0.0132676202 -0.0123814676 -0.0040077316 0.0032726199 0.0012670343 0.0063860584 0.0025625800 -0.0044628964 -0.0073196226 -0.0045413971 -0.0015437284 0.0196021586 -0.0203798902 0.0001667150 -0.0020214161 0.0020093137 -0.0005630340 0.0002262191 0.0005134363 -0.0003028149 -0.0003227874 -0.0008206280 0.0006939564 0.0001975900 -0.0013476216 -0.0003373664 -0.0001529510 0.0004336280 0.0000024223 -0.0003700868 0.0004918751 0.0003885160 0.0005668329 -0.0012938109 0.0026772301 -0.0036557420 -0.0008625664 0.0001971459 -0.0006048315 0.0002527161 -0.0002447796 0.0000376592 0.0003480227 0.0016385486 -0.0019554067 0.0008218839 0.0011422803 -0.0010471744 0.0019196695 0.0036642853 -0.0078461008 0.0072312844 -0.0131918271 0.0211993575 -0.0047110838 0.0065286768 -0.0102400488 0.0013832785 0.0071307316 -0.0096831915 0.0032356351 0.0122818000 -0.0163782686 0.0036040260 -0.0166679389 0.0229517930 -0.0068955085 -0.0189479847 0.0250975761 -0.0051093264 0.0770668148 -0.1049251602 0.0284613131 0.0576948387 -0.0822893034 0.0184174540 0.0201512920 -0.0310320566 0.0075089496 0.0322504695 -0.0458436445 0.0116653914 0.0795651154 -0.1121349956 0.0256452373 0.0001731653 0.0013786170 0.0023545755 0.0125118782 -0.0100342273 0.0015978073 -0.1470536901 -0.1210535731 0.0669389581 -0.0002183962 0.0009031479 -0.0002384580 -0.0019812895 0.0036976043 -0.0011775987 0.0007909123 -0.0024828155 0.0014254919 0.0040626804 -0.0007291310 0.0026744180 -0.0001210383 0.0082120754 -0.0081371842 -0.0088022551 -0.0081795713 0.0054168715 -0.0006399494 -0.0011338733 0.0013218570 0.0012593882 0.0000378701 0.0008352472 0.0003234302 -0.0000282560 -0.0001943285 -0.0075237946 0.0056545014 -0.0158662219 -0.0084803251 0.0096860728 -0.0356304093 -0.0038649819 -0.0202322594 0.0144111948 -0.0110318754 0.0166884690 -0.0250339489 0.0470894076 0.0101877417 0.0115953286 -0.0469331500 0.0039767736 -0.0341687804 0.0047222062 -0.0008095229 -0.0051228591 -0.0004548850 0.0038573567 0.0007918454 -0.0031128340 0.0047872100 0.0046853847 0.0003196301 -0.0001513634 -0.0012380911 -0.0007065249 -0.0000123740 0.0002629053 0.0008527730 -0.0006948086 -0.0011846953 -0.0175417821 0.0383767034 -0.0228663388 0.0032949193 -0.0189406585 0.0172792494 -0.0156986053 0.0296024494 -0.0084239424 0.0058742355 -0.0198544698 0.0121773252 -0.0066751476 0.0290281809 -0.0139378278 0.0160124572 -0.0167571445 0.0095557907 0.0353160729 -0.1070616214 0.0591394397 -0.0083770680 0.0125981260 0.0012084582 0.0138962302 -0.0525460122 0.0025571327 0.0070528173 0.0154249894 -0.0026743266 0.0607395010 -0.0996515928 0.0537911642 0.0487728965 0.0760568008 -0.0153067414 -0.0712144164 -0.0960658645 0.0749377718 0.0778422033 0.0443369451 -0.0248762696 -0.0670850667 -0.1295225013 0.0151839016 0.0625138145 0.0289812876 -0.0776943785 0.3527883432 0.4035280188 -0.1983384950 -0.0254538005 0.0168031600 -0.0023135363 0.1291077784 0.1920264096 -0.0407212992 -0.0119390874 0.0137423621 -0.0319601729 0.3817469818 0.3729970083 -0.2400638821 0.0002012882 0.0156165145 -0.0053286428 -0.0082662119 0.0136095841 -0.0040305983 -0.0463136516 -0.0475636937 0.0356985083 -0.0593127664 -0.0490524748 -0.0020340005 0.0014627179 -0.0122430559 0.0038853983 0.0032535071 0.0022384243 -0.0068470815 -0.0011817664 -0.0180327341 -0.0056529711 -0.0004020622 0.0014781802 0.0051565697 0.0081010768 -0.0208260869 -0.0154019735 0.0100967489 0.0102897635 0.0062956250 0.0110513789 0.0111431019 0.0002618811 0.0005562654 0.0038255126 -0.0052621950 0.0145971837 0.0110788908 0.0066615164 0.0032404237 -0.0099307279 -0.0104137346 -0.0241460672 -0.0209671299 0.0155204086 0.0203791752 -0.0220014749 -0.0159723842 0.0015867079 -0.0141971538 -0.0250083751 -0.0319981953 0.0204642938 0.0041761144 0.0427694316 -0.0182126517 -0.0224694311 -0.0549404599 0.0106549762 0.0269881399 0.0056922926 -0.0021313998 0.0244651534 0.0359960008 0.0155549456 -0.0067853978 -0.0389414894 0.0023362352 0.0448479937 0.0458812339 -0.0082759651 -0.0022770233 0.0005191196 0.0009440298 0.0009870304 0.0015012982 0.0001841401 0.0021360910 -0.0000345892 -0.0012073493 -0.0010087266 0.0015746696 0.0007124373 0.0027240041 -0.0001107616 0.0000805281 -0.0006540604 0.0015224806 -0.0021330519 -0.0030299793 -0.0025990046 0.0022562453 -0.0003178356 0.0007129629 -0.0006165555 0.0018484682 0.0240298683 0.0170577779 -0.0142718803 -0.0156842720 -0.0125940516 0.1060427418 -0.0165171957 -0.0099417184 -0.0090499700 0.0331655267 0.0003149545 0.0436535338 -0.0260643949 0.0376736436 -0.0551865427 0.0053580653 0.0126307915 -0.0163318801 -0.0026662445 0.0067299898 0.0057470104 0.0132599330 -0.0053972568 0.0012086083 -0.0089035918 0.0155904902 0.0127660127 0.0439086585 -0.0086276751 0.0097458646 0.0027155470 0.0028877653 -0.0034017029 -0.0214106616 0.0149752601 0.0297300657 0.0027525487 -0.0086053731 0.0043377230 0.0058041949 -0.0058908487 -0.0026520908 -0.0042333191 0.0018705405 -0.0028537633 -0.0009923375 0.0118526479 -0.0102720311 -0.0015698525 -0.0016881523 0.0016008505 -0.0021448844 0.0014325863 -0.0004994162 0.0011803755 -0.0026207171 0.0004972760 0.0026987251 -0.0010886382 -0.0028640434 0.0000871975 -0.0020795774 0.0008103983 -0.0037856838 0.0003529001 -0.0004937021 -0.0004993451 0.0019162885 -0.0031435276 0.0055151618 -0.0078528623 -0.0026054642 0.0052990300 -0.0062307854 0.0016364237 -0.0043992982 0.0009021323 -0.0009686048 0.0000594839 0.0025736610 -0.0005237107 -0.0003700956 -0.0043118423 0.0030274663 0.0026146701 -0.0120930753 0.0080451106 -0.0244783037 0.0357333758 -0.0078975595 0.0118065997 -0.0169518561 0.0018492872 0.0140123682 -0.0238124764 0.0054489087 0.0184701439 -0.0254518679 0.0082231457 -0.0254967619 0.0414929874 -0.0089093938 -0.0313981480 0.0437434813 -0.0115500802 0.1300675761 -0.1835829279 0.0492513864 0.0991854308 -0.1425749792 0.0327324629 0.0374866958 -0.0503848524 0.0154114707 0.0539669455 -0.0708695917 0.0185752738 0.1307022695 -0.1932956245 0.0438614724 0.0017238281 0.0010801486 0.0020606763 -0.0146660369 0.0152315138 0.0015813287 -0.0311234261 -0.0086103435 0.0054287318 0.0011155388 0.0001010099 -0.0005671550 -0.0006903595 0.0003789516 -0.0000772446 0.0002050300 -0.0016790075 0.0007574297 0.0020491037 -0.0002429620 0.0019786695 0.0011298383 0.0034511707 -0.0035706567 -0.0048025363 -0.0023423922 -0.0001441718 0.0003351397 -0.0001673346 0.0010998357 0.0005317604 0.0001389116 0.0002090992 -0.0002101590 0.0003449342 0.0004867888 -0.0039952305 0.0013349491 -0.0085961885 -0.0038954613 0.0041959223 -0.0144767563 -0.0013139970 -0.0061810596 0.0064742139 -0.0037802882 0.0059444604 -0.0080439142 0.0093634449 0.0012102468 0.0009903632 -0.0204169966 0.0025468959 -0.0082625426 -0.0007981131 0.0006465411 -0.0012033764 0.0020717322 -0.0005045639 -0.0030542290 -0.0036075790 0.0021020407 0.0022861892 -0.0003258236 0.0001261309 -0.0005912743 -0.0005464504 -0.0001040382 0.0004082910 0.0004130535 -0.0003859250 0.0000669687 0.1179354655 -0.1415225257 0.0770905039 -0.0177686436 0.0894195144 -0.0251408105 0.0544878882 -0.0994695137 0.0746295147 -0.0716378622 0.0617611046 -0.0313632823 0.0242923520 -0.1433909377 0.0152193316 -0.0680274867 0.0316339330 -0.0847017232 -0.2157172155 0.4352864722 -0.2194080020 0.0531656210 -0.0055712191 -0.0108363826 -0.0708153242 0.2185864240 -0.0100770695 0.0121995106 -0.0201870089 -0.0355441229 -0.2969271753 0.3845875972 -0.2410373709 0.0099590034 0.0120004154 0.0107273081 -0.0042661551 -0.0093393152 0.0216893115 0.0223667111 -0.0030153761 0.0008733837 -0.0112906975 -0.0222230065 -0.0114379092 0.0057251606 -0.0037311889 -0.0250531470 0.0652789109 0.0449017982 -0.0199378490 -0.0063781255 0.0131018105 0.0005267904 0.0216402232 0.0249286395 -0.0056513115 -0.0145664994 0.0166119342 -0.0146186776 0.0609435733 0.0409465142 -0.0395302866 0.0291853646 -0.0574027357 0.0364582089 0.0499034668 -0.0569201582 -0.0119037952 -0.0132920290 -0.0014123517 0.0094850234 -0.0133832650 -0.0059267310 -0.0082525214 -0.0292751985 -0.0196766952 -0.0186829914 0.0228895471 -0.0264774495 0.0176636813 -0.0092216794 -0.0053041385 0.0285079071 -0.0376891315 0.0302191407 -0.0035701364 0.0398359297 -0.0160033673 0.0438638491 -0.0596082697 0.0090297628 -0.0030884743 0.0027618953 -0.0054541856 -0.0308038879 0.0452531713 0.0109302412 0.0019160622 -0.0438969814 0.0053554437 -0.0355146996 0.0660659278 -0.0218054777 0.0163886539 -0.0118655192 -0.0049567409 -0.0000918636 0.0030531701 -0.0192480179 -0.0027913323 -0.0072708044 0.0083590756 -0.0086459693 -0.0135944304 0.0121256697 -0.0028680610 0.0120233455 0.0068604593 -0.0111517898 -0.0245980876 -0.0046804649 -0.0080977246 -0.0025743966 -0.0173370598 0.0049633546 0.0148555619 0.0071154126 0.0026165381 -0.0266417802 -0.0153019633 -0.0014377014 0.0165766284 0.0075105181 -0.0016588529 0.0005412662 0.0004560211 0.0005599597 0.0007755960 0.0013522615 0.0028193223 -0.0005945823 -0.0003281074 0.0002856059 -0.0007442552 -0.0004718156 -0.0000254109 0.0009430805 0.0014468907 -0.0011448179 0.0002688574 -0.0041519491 -0.0063553295 -0.0001096009 0.0047961859 -0.0020608480 0.0018033485 0.0005945440 0.0021962989 -0.0026852864 0.0001509403 0.0021569450 -0.0021230536 0.0007152383 -0.0003634183 -0.0019809144 0.0008084930 0.0012310540 0.0035500590 0.0054393028 -0.0000384712 0.0045955580 0.0003256780 -0.0018151398 -0.0043375092 0.0025975504 -0.0032259515 -0.0020636813 0.0071199514 0.0002031809 0.0009390425 -0.0016370570 0.0002597738 -0.0004265434 -0.0001279196 0.0024723161 0.0025872784 -0.0017552302 -0.0016745096 0.0000832509 -0.0035184454 -0.0009567045 0.0027123605 -0.0019598934 -0.0012756346 -0.0010953322 -0.0005944778 0.0019494052 -0.0026872415 0.0027164318 -0.0000400014 0.0111559196 -0.0008328177 -0.0044544661 0.0479329176 -0.3704993628 0.2933676185 -0.0771758933 0.1094167086 -0.0584183200 0.0183503958 -0.0059023055 0.0202745056 -0.0002154680 0.0168538088 -0.0191141758 -0.0002951475 -0.0008468601 0.0169070141 -0.0033480485 -0.0146049308 0.0013995816 0.0351081933 -0.0047013402 -0.0112422292 0.0023610879 0.0056388595 0.0095543860 -0.1015011965 0.0861491462 -0.0427789164 -0.1329317894 0.0927071347 -0.0601656934 -0.0309670402 0.0754692052 -0.0391340884 -0.0171359894 0.0395132057 -0.0250462902 0.0138075509 0.0130999425 -0.0060846644 -0.0340774739 0.1432103712 -0.0959648423 -0.0002121187 0.0034579910 -0.0026350748 -0.0087608171 0.0139333283 0.0040718174 -0.0062438652 0.0130244728 -0.0026515201 -0.0048752928 0.0054588598 -0.0057373670 -0.0106442786 0.0017732651 -0.0032425376 -0.0053167742 0.0122348475 -0.0014608239 0.0577039048 -0.0767460270 0.0246306834 0.0398965216 -0.0540307352 0.0093153354 0.0575026752 -0.0931077409 0.0143072895 0.0783354930 -0.1130509384 0.0200782120 0.0746523972 -0.0981432168 0.0304986520 -0.0024787559 -0.0364710412 0.0020977364 -0.4485151200 0.3567638905 -0.0001763257 0.0030068272 -0.0030526447 0.0013774577 -0.0329100340 0.0655660357 -0.0400554250 0.1615794465 -0.2489262837 0.2038017984 -0.0393049717 0.0663995382 -0.0656906253 -0.0045977004 -0.0084528232 -0.0341884102 0.0081470518 -0.0094532851 0.0452408242 0.0312783446 0.0081553779 -0.0033439315 -0.0351790649 -0.0025014243 0.0136293523 -0.0205075804 0.0636687266 -0.0361814333 -0.0061444225 0.0060395708 -0.0014127820 0.0002695633 -0.0526671801 0.0584488887 -0.0014715459 -0.0088299451 0.0002197201 0.0042541321 -0.0628210595 0.0876273875 0.0575525454 -0.0089761158 0.0538787277 -0.0469154878 -0.0104232917 -0.0092881859 0.0596568771 -0.0007878399 0.0498937396 0.0527609060 -0.0116367008 -0.0296161352 -0.0634736868 0.0710907300 0.0777161698 -0.0198791399 0.0495637042 0.0451561756 -0.0505841361 0.0014105726 0.0527449580 0.0131964355 -0.0154977573 -0.0152095082 0.0222326434 -0.0333433425 -0.0028679021 -0.0062517658 -0.0034298513 0.0026526349 -0.0001401659 -0.0065303211 -0.0082833323 -0.0024339918 -0.0045326125 -0.0084734931 0.0073395068 0.0044579846 -0.0027885983 0.0007122152 0.0060991992 0.0085064014 0.0019036840 0.0057003900 0.0080158435 0.0088706223 0.0001235287 -0.0065865342 -0.0104607963 -0.0093265186 0.0023259318 0.0033553528 -0.0059861245 0.0000266474 -0.0056673263 -0.0065351828 0.0102905378 0.0118973010 0.0044849078 0.0009786418 0.0003726324 -0.0026487285 -0.0049630607 0.0001404173 -0.0038758187 -0.0047384340 -0.0040574147 0.0032714434 -0.0011201445 -0.0004801574 0.0006719789 0.0053716208 0.0000984957 0.0015024055 0.0045349899 -0.0012166290 0.0033758439 -0.0048815386 0.0060835492 -0.0044387103 -0.0011734864 -0.0012957216 0.0032856952 -0.0004294865 0.0074003468 0.0029251310 0.0009898272 0.0025565819 0.0101843395 -0.0022988230 -0.0040677379 -0.0000096995 -0.0026800400 -0.0033779563 0.0007077872 0.0038630970 0.0019587719 -0.0023521189 -0.0023938194 0.0014438879 -0.0014300676 0.0033373800 0.0004013735 -0.0011552641 -0.0008403886 0.0008482573 0.0015538757 0.0003183554 0.0018384571 -0.0038476134 -0.0014142947 0.0016499197 -0.0013710437 -0.0017552715 0.0038066628 -0.0044292579 0.0005360316 0.0064769280 0.0026621867 -0.0010356015 -0.0007708430 0.0020307365 -0.0000100155 -0.0023453863 -0.0000982646 0.0013954688 0.0013837503 0.0016017309 0.0007523881 -0.0009868871 0.0005756451 0.0042182141 -0.0005502257 0.0012502899 0.0011146869 0.0000493180 -0.0010235379 -0.0011288227 0.0015805510 0.0003418222 -0.0003201131 0.0013951918 -0.0007438933 0.0014939352 0.0003974253 0.0004730268 -0.0000472137 0.0001684328 0.0005096511 0.0050238894 -0.0018932531 -0.0017295294 -0.0005365048 -0.0007394864 -0.0003705492 -0.0017657380 -0.0047093170 -0.0015668513 0.0033360284 -0.0036037157 0.0031460617 0.0001501763 0.0027680083 0.0000403431 -0.0099319003 0.0157399918 -0.0197465459 -0.0165885524 -0.0006643725 -0.0560043698 -0.0658451885 0.0542383445 0.0024140428 0.0543326713 -0.0253192213 -0.0039973180 -0.0024828609 0.0863107544 0.0041228844 -0.0181787295 0.0017437919 -0.0573871493 0.0115657961 -0.0799067412 -0.0783000490 0.0376545909 0.0613417171 -0.0020576821 0.1062616213 -0.0452647935 0.0527215318 -0.0896104587 0.0017321019 0.0377379109 -0.0217122530 -0.0349570023 -0.0888420530 0.0451180344 -0.1194508249 0.0045529035 -0.1038711540 0.1378837710 -0.0285894586 -0.1294957447 -0.0049344397 -0.0962034403 0.0620908001 0.0168144472 0.0413687257 -0.0233969900 -0.0574798064 0.0110761330 0.1188560191 0.0593036002 0.0429081884 -0.0652458924 0.0476939944 0.0454214179 -0.0021979317 -0.0241343212 0.0577193261 -0.0152369926 -0.0141365008 -0.0491134700 0.0496245268 0.0121047749 0.0015301938 -0.0068730381 -0.0131272583 -0.0034536936 -0.0150041126 0.0023797748 -0.0100860686 -0.0009736007 -0.0051198015 0.0063894607 -0.0034486648 0.0013336731 -0.0015456903 0.0019517414 -0.0026278111 0.0040879725 -0.0042312773 -0.0014507737 0.0004502258 0.0020621722 -0.0002605262 0.0003731818 0.0002820401 0.0050289701 0.0012490710 -0.0015588634 0.0014531581 -0.0006827640 0.0018954532 -0.0090286338 0.0072963371 -0.0022735201 -0.0108415856 0.0089470402 -0.0016227342 -0.0011774400 0.0088117012 -0.0052364475 0.0003616915 -0.0007875233 -0.0018203330 0.0044730093 0.0007132339 0.0010474931 0.0021287105 0.0070234313 -0.0026836456 -0.0040076486 0.0075816247 -0.0014789684 0.0003579373 -0.0008610632 -0.0002382509 0.0010438458 -0.0006596845 0.0009625028 0.0038574206 -0.0058709913 0.0007737037 -0.0051384457 0.0049360039 -0.0027371741 -0.0051254979 0.0061848156 -0.0001728728 0.0202813548 -0.0262626319 0.0064548334 0.0123255690 -0.0201590635 0.0027707080 0.0075419259 -0.0137124966 0.0021413580 0.0145753069 -0.0206921865 0.0066428255 0.0262706687 -0.0334130197 0.0074095520 -0.0015863176 -0.0018728607 0.0037115757 -0.0082740877 0.0079291364 0.0003079353 -0.0655538865 0.0551186983 -0.0245688306 -0.0017327059 0.0031837689 -0.0018904665 0.0075565316 -0.0112161168 0.0095452505 -0.0019071872 0.0032140353 -0.0032933966 -0.0052920233 0.0017673983 -0.0042332820 -0.0009555010 -0.0037024805 0.0070241743 0.0118918094 0.0007067108 0.0018473326 -0.0022965958 -0.0023497797 -0.0028723214 -0.0008651991 0.0030605078 -0.0015863253 -0.0002252548 0.0002236776 -0.0001123312 0.0064778565 -0.0061830502 0.0173573044 0.0072612462 -0.0044855887 0.0125380383 0.0033853996 0.0036369156 -0.0055099621 0.0175927309 -0.0029116976 0.0132012186 -0.0020677375 -0.0008804312 0.0015329099 0.0139400838 -0.0002212002 0.0115103025 0.0145878039 -0.0051400276 -0.0078625445 -0.0082027024 0.0094814899 0.0113722551 0.0077196828 0.0010676342 -0.0006792130 -0.0025668801 -0.0000452542 0.0025545324 0.0005072729 -0.0008093765 -0.0006687562 0.0011555085 -0.0017220990 -0.0003322036 0.0661634955 0.0517585602 -0.0400130122 -0.0108690090 0.0550800577 0.0865042656 -0.0105242841 0.0690062685 0.0795340490 -0.0990237687 -0.0161673192 0.0233947524 0.0046692147 -0.0149578153 -0.1025681368 0.0064224515 -0.0344764707 -0.0991171370 -0.0208115194 -0.1940064053 0.1641668629 0.1345257548 -0.0726723594 0.0837399598 -0.0078220465 -0.1207202023 0.0166418779 0.2069420064 -0.1147621467 0.0240386482 0.0469259841 -0.2578797365 0.0846473996 0.0316206993 0.0493537506 0.0855148042 0.0314165603 0.0580590366 0.0828295392 0.1026387417 -0.0306445598 0.0122425661 -0.0153557455 -0.0082762309 -0.1084806383 -0.0082852902 -0.0143637970 -0.1129450612 -0.0342917414 -0.2205363494 0.1461289211 -0.1900159089 -0.0895166262 0.0987909663 -0.0339852477 -0.1301028432 0.0303816041 -0.2578496162 -0.0883341717 0.0276577783 -0.0987375816 -0.2485524334 0.0575723842 0.0475777473 0.0525824936 0.0278055402 0.0154431732 0.0315746239 -0.0672858578 -0.0241036556 0.0707971576 0.0275466618 -0.0120604401 0.0381184834 -0.0694579088 -0.0261446370 0.0162112262 -0.0332929583 0.0219399629 -0.0309918806 0.0417173026 -0.0043038253 0.0264550022 0.0346129194 -0.0378861022 0.0174152430 -0.0218298853 0.0490340674 0.0171379291 0.1304434563 -0.0611034497 -0.0303927673 0.0185848230 -0.0041984583 -0.0157054649 -0.0393350240 0.0543127632 0.0028286403 0.0073682634 -0.0615155156 -0.0038656478 -0.0658130075 0.0784650027 -0.0160276141 0.0369988386 -0.0414074431 -0.0251081551 0.0549475225 0.0369421886 0.0046307130 -0.0474183550 0.0022196761 -0.0127773857 -0.0522975308 -0.0590572410 0.0242407380 0.0154569097 0.0686042510 -0.0199875755 -0.0895555506 -0.0994372970 0.0095846656 0.0578978223 0.0081424768 0.0177849575 0.0419166165 0.0507458880 0.0057423082 -0.0313677242 -0.0660232895 0.0252176291 0.1665871245 0.0525860998 -0.0465608701 0.0160124411 0.0002668169 0.0001558604 -0.0003214399 0.0007079572 -0.0006709534 -0.0008454883 0.0003520728 -0.0024464266 -0.0030695544 0.0027410656 0.0003054967 0.0027720082 -0.0013565056 -0.0006233943 0.0001961291 0.0031932814 -0.0016261736 -0.0019109503 -0.0011003169 -0.0013499430 0.0005114769 -0.0030825368 -0.0035387939 0.0023770325 0.0005963635 -0.0024914901 0.0016294822 0.0020227445 -0.0018988071 0.0010887169 0.0005584473 -0.0015333541 -0.0011586203 -0.0025726672 -0.0047381615 0.0051703875 -0.0085442157 -0.0008127610 -0.0022866813 -0.0060708917 -0.0001069614 0.0052011483 0.0000691802 -0.0027548972 -0.0064165820 0.0013536803 0.0076743239 0.0016493632 0.0035601580 0.0032429089 -0.0023416073 0.0020108826 0.0078909118 -0.0000774444 -0.0067938148 -0.0038583799 -0.0004679523 -0.0031996255 0.0056144053 -0.0010100180 0.0022808625 -0.0006679825 0.0001762504 0.0029074086 -0.0021594164 -0.0012257589 -0.0037630562 0.0031131002 -0.0000561569 -0.0572511885 0.2674786806 -0.1030057781 0.1358913383 -0.1691029008 0.1048449835 -0.0826612499 0.0616323979 -0.0514375935 0.1122604731 -0.1259804062 0.0986181779 0.0389301494 -0.0201502800 -0.0349392904 0.0308603588 -0.0494820842 0.0186220225 -0.1012583294 0.0136416169 -0.0070945518 -0.0871194503 0.0911498970 -0.0873104029 0.3944557650 -0.3791020817 0.1599314835 0.2323559446 -0.2144147418 0.0821686808 -0.1642472190 0.0163554350 -0.0518371365 0.0029333671 0.0216422673 0.0286087584 -0.0355936366 0.0097300593 -0.0086750225 -0.0068405600 -0.0566593473 0.0281364770 -0.0201726004 0.0295749999 -0.0029243413 0.0173738749 -0.0279845912 -0.0011431104 0.0135420513 -0.0237228663 0.0053989971 0.0185686061 -0.0142996338 0.0075622775 0.0053479604 0.0058272160 0.0015652248 -0.0000186404 -0.0045787195 -0.0000063628 -0.0459756043 0.0602026786 -0.0212510489 -0.0188280261 0.0444682149 -0.0005665511 -0.0867294649 0.1330347309 -0.0207485140 -0.1055448794 0.1501460564 -0.0293397319 -0.0819731560 0.1075505556 -0.0335119406 0.0354749271 0.0375157379 0.0071324770 0.2642976147 -0.2419283950 0.0412882767 0.0005654569 -0.0001372568 0.0000617727 -0.0235253287 0.0381393429 -0.0160273966 0.0489193823 -0.0797536669 0.0773973067 -0.0089075943 0.0247663211 -0.0216369584 0.0035891091 -0.0044091979 -0.0187368212 0.0087838771 0.0020202767 0.0219101861 0.0094123959 0.0011422367 -0.0049838773 -0.0257567495 -0.0090104723 0.0111217895 -0.0068303775 0.0182657515 -0.0133684763 0.0024690770 0.0000403399 -0.0064709518 -0.0080884274 -0.0353749784 0.0212334790 -0.0108937131 0.0043601300 -0.0330256920 0.0012761871 -0.0521684499 0.0697242314 0.0279043312 0.0000935126 0.0235481874 -0.0305496629 -0.0011885396 -0.0063066575 0.0113401207 0.0004497421 0.0153169651 0.0599933621 -0.0150066633 -0.0441698473 -0.0449600889 0.0639767898 0.0545587937 -0.0268053447 0.0529259763 0.0473847643 -0.0077626312 -0.0002870152 0.0100343757 0.0135124401 -0.0043093449 -0.0132593136 0.0093614757 -0.0094664758 -0.0004114994 0.0029567656 0.0017618473 -0.0015616066 0.0008889761 0.0041622735 0.0045164729 0.0019124060 0.0041308982 0.0046467972 -0.0049018298 -0.0005975621 -0.0000728147 0.0005212964 -0.0022993343 -0.0063406206 -0.0004007925 -0.0017368080 -0.0053476644 -0.0021982074 -0.0019138575 0.0053072992 0.0063856808 0.0034665213 0.0021368298 -0.0010797073 -0.0039151303 0.0012903516 0.0100749364 -0.0064069600 -0.0006300828 -0.0011313447 -0.0103807340 0.0036297925 -0.0010718597 -0.0013187131 -0.0000242107 -0.0007222916 -0.0012707615 -0.0004366963 -0.0017799584 -0.0015356950 0.0006742799 -0.0000430307 -0.0005324929 0.0008486792 -0.0002968702 -0.0009349239 0.0012564183 0.0057774951 0.0090646294 -0.0044334746 0.0072736016 0.0089935731 -0.0054239436 0.0031237361 0.0061687828 -0.0014055109 0.0074789639 0.0071737775 -0.0040176609 0.0051588302 0.0076039136 -0.0039474891 0.0017488232 0.0023350426 0.0020421225 0.0010674363 0.0011264082 -0.0029825330 -0.0006527105 -0.0020323655 0.0001392322 -0.0009074818 -0.0018356723 0.0010099483 -0.0017402742 0.0001895646 -0.0030708566 0.0032298709 -0.0009911055 0.0048496086 -0.0009406854 -0.0004088261 0.0010478505 -0.0039343594 0.0012539548 -0.0023418057 0.0083845915 -0.0022772193 0.0162240033 0.0015515509 -0.0016819805 0.0102205781 0.0007832776 0.0016823850 -0.0045367251 0.0035478900 0.0004578024 0.0000732560 0.0017817772 0.0016129967 -0.0031196054 0.0110997173 -0.0045292806 0.0099313861 0.0041841318 -0.0019596757 -0.0052572242 -0.0018430172 0.0031298600 0.0045095373 0.0005607624 -0.0049760697 0.0056121776 0.0035265213 -0.0018931683 -0.0009120921 0.0014565908 -0.0053054914 0.0061212580 0.0133159987 0.0033708891 -0.0089023491 0.0011010283 0.0043679250 -0.0012675846 -0.0048861040 -0.0000881584 0.0025129217 0.0127421896 0.0034183564 -0.0147250459 0.0010927397 -0.0016327302 -0.0070565102 -0.0010405389 0.0071227993 0.0017589848 0.0175644513 -0.0175230742 0.0008191492 -0.0054778444 -0.0388837839 -0.0429168166 0.0439138352 0.0141960388 0.0540301475 -0.0056612335 -0.0017529995 -0.0002812492 0.0416660708 -0.0008371837 -0.0097839311 -0.0025255567 -0.0112996153 0.0033387946 -0.0172011143 -0.0242505294 0.0127364184 0.0000482155 -0.0005503890 -0.0010642367 -0.0019174478 -0.0023351560 -0.0043620825 -0.0002692008 -0.0027443308 0.0004785023 0.0004958487 0.0034104501 -0.0020837983 0.0040439863 -0.0000208630 0.0017862548 0.0032029984 0.0006476768 -0.0087991891 -0.0015158852 0.0035678245 0.0038353798 0.0001102405 -0.0032314930 -0.0011902479 -0.0034686326 -0.0017019332 0.0059947332 0.0018550963 -0.0032377132 -0.0039959332 0.0045610449 0.0000414228 0.0010424457 0.0014052629 0.0008970314 -0.0002392205 -0.0038670747 -0.0025713328 0.0004661971 -0.0016977104 0.0017866094 0.0014770121 0.0121096779 -0.0036604752 -0.0040781303 0.0131580108 -0.2669763083 0.2681437903 -0.1134238092 0.1378249816 -0.0673669317 -0.0298198132 0.0369954888 0.0016848176 0.0950717120 -0.0683284181 0.0468811208 0.0347327535 -0.0244716086 0.0241012348 0.0442095633 -0.0681711866 0.0331494347 -0.0051763650 0.0173739219 -0.0304524595 -0.0961130167 0.0977361798 -0.0603698900 0.1097839730 -0.1163560340 0.0616200330 -0.1425259097 0.0871592220 -0.0714512680 -0.2336294798 0.2045425525 -0.1519876508 -0.0131732639 0.0568290897 -0.0376452016 -0.0092549375 -0.0342977290 0.0086555799 -0.0243307969 -0.0053401368 0.0003130696 0.0122410468 -0.0156220516 0.0077709667 -0.0113517180 0.0124025752 -0.0091745283 -0.0101166788 0.0123010173 -0.0012513957 0.0031067600 0.0156634419 0.0005528713 0.0075950641 0.0071427406 0.0065919347 -0.0066027417 -0.0002808366 -0.0000816630 0.0290855458 -0.0384386103 0.0082841040 0.0221388017 -0.0125990516 0.0041465902 0.0525639608 -0.0655399016 0.0372923998 0.0607758332 -0.0888418962 0.0245610450 0.0406283403 -0.0751381493 0.0120814457 0.0215236962 -0.0428126251 0.0131049290 -0.5513393394 0.3931102289 0.0340390240 0.0012589162 0.0001966551 -0.0001298599 0.0300003219 -0.0407471052 0.0146637813 -0.0416460088 0.0714458147 -0.0761796296 0.0059786995 -0.0260962545 0.0203996528 -0.0062708134 0.0059622074 0.0207042117 -0.0100659735 -0.0029274330 -0.0229072082 -0.0077794646 -0.0021892634 0.0067863755 0.0298928278 0.0111057568 -0.0142237126 0.0066795294 -0.0158468094 0.0139492458 -0.0046344395 0.0007962548 0.0086939746 0.0094376293 0.0385015150 -0.0211404494 0.0128582954 -0.0055922010 0.0379076287 -0.0014124627 0.0572117327 -0.0764991524 -0.0253217183 0.0025001364 -0.0245654285 0.0394651259 0.0031971495 0.0092154667 -0.0122164009 -0.0005421013 -0.0169213482 -0.0698944815 0.0172368029 0.0535297456 0.0505309429 -0.0748018819 -0.0605360986 0.0364011523 -0.0649182039 -0.0585632032 0.0016861025 0.0003564913 -0.0053735460 -0.0180268626 0.0043132861 0.0167885762 -0.0097693788 0.0077350891 -0.0008843894 -0.0028904995 0.0010045033 -0.0003770155 0.0018453598 -0.0052019664 -0.0023513631 -0.0010991129 -0.0028298522 -0.0035995181 0.0019275843 0.0034568030 -0.0024947479 -0.0007415472 0.0043330083 0.0035923638 0.0008015721 0.0028810093 0.0042801881 0.0020243983 0.0076440659 -0.0061392920 -0.0106100482 0.0030169589 -0.0010989291 0.0012215416 -0.0076536766 0.0005820538 -0.0002955083 -0.0099223647 0.0089689056 0.0084298878 -0.0046673269 0.0054796435 0.0010888074 -0.0002568251 -0.0012895665 0.0014805274 0.0000154517 -0.0011535141 -0.0003559076 0.0014402483 -0.0004023791 -0.0005118879 0.0011955546 0.0002212942 -0.0003668527 0.0013906956 0.0000442338 -0.0061865823 -0.0093374153 0.0031489202 -0.0024645280 -0.0082504866 0.0041847054 -0.0023011393 -0.0042672533 0.0007825168 -0.0040953500 -0.0038137315 0.0026838018 -0.0058807317 -0.0051569168 0.0033394131 -0.0013359603 0.0016090223 0.0001472476 -0.0014335664 0.0012876822 0.0003998502 0.0008128141 0.0010508084 -0.0006807309 0.0011979350 0.0011289955 -0.0001631150 0.0011822999 -0.0011195367 0.0018588982 -0.0014510162 0.0015743376 -0.0033334206 0.0002086896 -0.0015083867 -0.0008254756 0.0016275874 -0.0006617166 0.0018498055 -0.0043289914 -0.0006876418 -0.0099631026 -0.0006111907 0.0015722872 -0.0049829865 0.0013808012 0.0011567010 0.0018629554 -0.0015338758 -0.0000798439 -0.0006383502 0.0020797991 0.0010390825 0.0015303651 -0.0047175355 -0.0001866690 -0.0064184434 -0.0036891118 0.0011383936 0.0055569390 0.0019503958 -0.0013253856 -0.0042231606 0.0015460134 0.0015141674 -0.0041477942 -0.0016539291 0.0005265841 0.0021127802 0.0013217501 0.0016302642 -0.0050080509 -0.0085183939 -0.0004060344 0.0113843877 -0.0012977775 -0.0019203751 0.0010068159 0.0028561735 -0.0002386584 -0.0037838577 -0.0112022182 -0.0010985489 0.0163194405 -0.0034430016 0.0016580002 0.0061552780 0.0013509391 -0.0065132632 -0.0031083379 -0.0160338688 0.0232169378 0.0104715929 -0.0060242985 0.0400057969 0.0481111966 -0.0524360909 -0.0162561747 -0.0646633270 0.0143213029 0.0055668456 -0.0020676543 -0.0430284015 0.0014449456 0.0068269432 0.0226323095 0.0168912704 -0.0129577416 0.0176401266 0.0280067803 -0.0205241379 -0.0317826673 0.0285730724 -0.0715805141 -0.0048747153 0.0173208486 -0.0034512020 0.0045191405 0.0147229815 0.0157905445 -0.0033435088 0.0241705693 -0.0732822972 0.1144940926 -0.0202359918 0.1144181727 0.1021270942 -0.0003299914 -0.1070743811 -0.0139599057 0.0052502194 0.0719724457 0.0028904703 -0.0285158725 -0.0150412493 -0.0325711895 -0.0205766174 0.0595440935 -0.0054470955 -0.0306129202 0.0180316797 0.0393596657 0.0277583821 0.0427830723 0.0318683150 -0.0479283879 -0.0340234094 -0.0400852931 0.0074112642 -0.0078539750 -0.0068316937 0.0291606205 0.0147844137 -0.0112225604 -0.0257159423 -0.0123627831 -0.0041862171 0.0233911363 -0.0169680932 0.0428380529 -0.0386018660 0.0242692520 -0.0076375105 0.0049003049 -0.0054946743 0.0089279105 -0.0078998733 0.0063989429 -0.0028317347 0.0019402883 -0.0013076396 -0.0030219662 0.0019508723 -0.0024506720 -0.0055238577 0.0022174750 -0.0016285623 -0.0003790156 0.0008914526 -0.0008963254 0.0386470239 -0.0352226420 0.0230269587 0.0496348560 -0.0415782709 0.0273401495 0.0174225323 -0.0181054303 0.0106885796 0.0016530168 0.0010265249 0.0004186331 0.0002443697 0.0030472787 -0.0014514526 0.0032368187 -0.0034850259 0.0018388875 -0.0016306082 0.0045412822 0.0003973313 0.0006455708 -0.0025291691 -0.0029359663 0.0012948736 -0.0011827083 0.0021969097 0.0041661643 -0.0035335567 0.0009531334 0.0003662214 0.0023668280 -0.0014404168 -0.0049566431 0.0016707971 0.0015012873 0.0117808641 -0.0137959349 0.0029897921 -0.0045082221 0.0017217015 -0.0035942502 -0.0045062515 0.0064895487 0.0019686010 0.0011468079 -0.0043419296 0.0048114892 0.0064407676 -0.0061008531 -0.0022470408 -0.0002710275 0.0057786268 0.0030744418 0.0721448147 -0.0648286016 0.0034066252 -0.0342233209 -0.0250089871 0.0123978897 -0.0036114787 0.0059349525 -0.0025825908 0.0060423576 -0.0114143523 0.0108201001 -0.0006301715 0.0038668358 -0.0040007946 -0.0047909212 0.0004123270 -0.0017037455 -0.0003866890 -0.0030995573 0.0027152552 0.0090936414 -0.0007637807 0.0008279775 0.0011317474 0.0002047990 -0.0013741340 -0.0009509420 0.0022420457 -0.0022785569 0.0004947596 0.0001674499 -0.0006810080 0.0035671218 -0.0015520657 0.0069498756 0.0040721422 -0.0038226207 0.0131640834 0.0021524897 0.0080979960 -0.0084475090 0.0166911480 -0.0009995816 0.0133279818 -0.0026998305 0.0037611913 0.0024433167 0.0064342001 -0.0001579450 0.0073179049 -0.0022658510 0.0001653553 0.0016106173 0.0014780371 -0.0028945967 -0.0020106618 0.0027523431 -0.0035968905 -0.0036340562 -0.0003267621 0.0001281923 0.0010422052 0.0025678699 -0.0009821069 -0.0020687132 0.0011476153 -0.0005782522 0.0005708977 -0.0297323063 0.0123486775 -0.0024030040 0.0158686571 -0.0370457929 -0.0142488852 0.0017143999 -0.0172841497 -0.0314390461 0.0435566923 -0.0318745968 0.0114386818 -0.0088440054 -0.0019277622 0.0327334542 0.0021811753 -0.0164354092 0.0478633514 -0.0123368404 0.1085367078 -0.0736165169 -0.0834938590 0.1325811964 -0.0935618059 -0.0157812708 0.1124636294 -0.0145347894 -0.1440181184 0.1761862042 -0.0918901553 -0.0656122726 0.1485664325 -0.0558037485 0.0251254821 0.0270627231 -0.0011220273 0.0072031839 0.0070595186 0.0154610831 0.0419212233 0.0360574270 -0.0166876346 -0.0085222446 0.0031793652 -0.0164426883 0.0117218640 0.0242690980 -0.0346294903 -0.0425737648 -0.0918703740 0.0443387553 -0.1177216520 -0.1495236908 0.0899174746 -0.0518819900 -0.0983300067 0.0241024306 -0.1512055238 -0.1422370496 0.0757787141 -0.0709742657 -0.0886187279 0.0280419517 -0.0075856613 -0.0380023687 -0.0061423104 0.0021984646 -0.0310861553 0.0253889844 0.0107036428 0.0340368233 -0.0024661998 0.0131885926 0.0284163771 -0.0180168386 0.0428562858 0.0004769309 0.0778031685 -0.0716028371 0.0186459195 -0.1093687943 0.0017753166 0.0194790272 -0.0222814191 0.0643910113 -0.0195847048 0.0616391596 -0.1845851192 0.0573597330 -0.3204638782 -0.0507157777 0.0116509619 -0.1551439391 0.0106402248 -0.0228479504 0.0792235124 -0.0515122906 -0.0058717404 -0.0243685165 0.0252310845 -0.0269163850 0.0910355575 -0.1740315504 0.0563630360 -0.1973277856 -0.0709197414 0.0078897117 0.1050031076 0.0349375144 -0.0205094028 -0.0709522251 0.0170899326 0.0267940861 -0.0796367758 -0.0422057407 0.0214383385 0.0223335091 0.0163695272 0.0289194643 -0.0682424301 -0.1850024346 -0.0057355582 0.2039690645 -0.0086663254 -0.0311637205 0.0160328877 0.0636047839 0.0002511862 -0.0588479296 -0.1970949184 -0.0156711212 0.3010837788 -0.0593906806 0.0138256427 0.1570286040 0.0001358230 0.0013499600 0.0007775930 0.0027038354 -0.0019570249 0.0006329352 -0.0000560953 -0.0052425190 -0.0057640459 0.0065075825 0.0022818019 0.0083084535 -0.0010702595 -0.0010922995 -0.0003327627 0.0063433683 0.0010128000 0.0000010110 -0.0048564296 -0.0021787507 0.0025412285 -0.0027815673 -0.0044564182 0.0004232693 -0.0656192577 0.0504413835 -0.0535851638 0.0324315883 0.1755194016 -0.0903981853 0.0479433614 0.1638061258 0.0238657902 -0.0458178614 -0.1622637878 -0.0445050438 0.0265157090 -0.0872208977 0.1128489815 -0.0375264723 -0.0790804986 0.1014071183 -0.0037162413 -0.1708834662 -0.0425666097 0.0022665790 0.1603203525 0.0271590377 0.0713647815 0.0270474784 -0.0510947230 0.0106869233 0.1712692946 -0.0712513967 -0.0406528805 -0.0284349920 -0.0829079879 0.0395091165 -0.0548041763 -0.0818206003 -0.0039122188 -0.0025756916 0.0311130632 -0.0192009972 0.0227367300 -0.0048611673 0.0234691620 0.0107549319 -0.0064673038 0.0020123150 0.0012732783 -0.0025151549 -0.0712785135 0.0592472319 -0.0366519738 0.0076136840 -0.0050083482 0.0072248853 -0.0041047655 0.0038210986 -0.0038472663 0.0077421008 -0.0051081713 0.0000706060 0.0085695468 -0.0081112927 0.0070921777 0.0082686778 -0.0056338823 0.0034436340 -0.0096374507 0.0091678202 -0.0073228848 -0.0349093541 0.0285858612 -0.0263364314 -0.0877808941 0.0717689702 -0.0480376211 -0.0506838133 0.0385248861 -0.0292508426 -0.0009966375 -0.0002301030 0.0017211694 -0.0020293036 -0.0047907744 0.0031406409 -0.0017572266 -0.0081500926 0.0082857909 -0.0034087284 0.0051191217 -0.0017866381 0.0004130640 -0.0012393399 0.0006016157 0.0037221673 -0.0020576741 -0.0001788893 0.0014958230 -0.0032698031 0.0010362957 -0.0013796594 0.0021432193 -0.0000826557 -0.0012987591 0.0034197544 -0.0023627301 0.0121647720 -0.0136265065 0.0028676652 0.0007852393 -0.0087839649 -0.0024149753 -0.0008533310 0.0008805765 0.0011331827 0.0042012065 -0.0056862854 -0.0015719563 0.0056014406 -0.0120466641 0.0030829016 0.0023721346 -0.0062597309 0.0024831842 -0.0602891106 0.0553888585 0.0006590077 -0.0000511526 0.0623193881 -0.0274733993 0.0005680646 -0.0005112794 0.0001367190 -0.0014776281 0.0041101655 -0.0019732679 -0.0033557515 -0.0022179598 0.0024327280 0.0118430241 0.0003190305 -0.0090415480 0.0048078288 0.0015105948 0.0065767353 -0.0069685448 0.0035216989 -0.0048694527 -0.0170119886 -0.0107908381 0.0130345605 0.0018208971 0.0007534538 0.0007089759 -0.0001656270 -0.0001728450 0.0003103872 -0.0057071722 -0.0052014935 -0.0020457916 -0.0058085536 0.0028478400 -0.0179744209 -0.0023732674 -0.0280079055 0.0390218831 -0.0159081091 -0.0064797418 -0.0055400366 -0.0281530840 -0.0104472005 -0.0102637195 0.0123714129 -0.0028200148 0.0034897604 0.0489891782 -0.0112870221 -0.0464811196 -0.0222607532 0.0486185395 0.0236655951 -0.0422365901 0.0550117040 0.0504851561 -0.0003040773 -0.0002565479 0.0006199399 -0.0012514493 0.0011951829 0.0009721208 0.0012921466 -0.0021336428 -0.0020176165 0.0167162439 0.0498232149 -0.0279780166 0.0336325384 0.0150965949 0.0642011084 0.0278544462 0.0417784012 0.0423211464 -0.0373929731 -0.0598812513 0.0352467417 0.0036722123 -0.0374074853 -0.0583187286 0.0095919249 -0.0542836674 -0.0282211216 -0.0388462410 0.0810476809 0.0148242090 0.0475136606 0.1695277605 -0.0894437115 -0.0540604085 0.0894698260 -0.0046465756 -0.0123429421 0.1818618492 -0.1446847261 -0.0961330470 0.0495666137 -0.0421776467 -0.0255294964 0.0169333546 0.0723287001 -0.0152162393 0.0458884499 0.0540287937 0.0241852069 -0.0734172544 0.0295430959 -0.0113210450 -0.0214963410 -0.0661805813 -0.0236125220 -0.0435423468 -0.0371957530 0.0536982867 0.0452833926 0.0325292990 -0.0102843402 0.1910220616 -0.0729573186 0.0703104117 0.0589548736 -0.0130359999 0.0233463813 0.1611413372 -0.1070975975 0.0701617749 -0.0114618948 -0.0213673836 0.0365026602 -0.0165373449 0.0319503178 0.0229877429 -0.0279320679 -0.0326352584 -0.0353288698 -0.0003704683 0.0357083459 -0.0331441407 -0.0186056299 -0.0307547793 0.0598285370 0.0613916487 0.0829093127 -0.0641518711 -0.0363608851 -0.0712213220 -0.0191348872 0.1032872228 -0.0359226194 0.0432944693 -0.0151274772 0.0190327184 -0.1036725884 0.1258043133 -0.0327985496 0.0657582291 -0.0675291209 0.1368579869 -0.0438892045 -0.0775787889 0.0569341217 -0.0593285635 -0.0066565289 -0.0396105648 0.0493026047 -0.0960041839 0.2395821801 -0.0241164570 0.0940221877 0.0954422929 0.0387272890 -0.0515799092 -0.0583172459 -0.0301559298 0.0707738245 0.0712228955 0.0156912936 -0.0820185376 0.0452948017 0.0449747827 -0.0199562588 -0.0375606994 -0.0686985572 -0.0755030327 0.2151827388 0.0295736586 0.0736221106 0.1099506585 0.0501112731 0.0870186020 -0.0307100773 -0.0343506606 -0.0006889581 0.0128258735 0.1095772726 0.0838404918 0.0108334892 -0.0844501249 -0.0462933711 0.1541919619 0.0002136451 0.0000434504 -0.0002871678 0.0006211136 0.0005765816 0.0019897056 -0.0014866533 -0.0010991269 -0.0005921801 -0.0008442918 -0.0008901840 -0.0005863498 0.0000995546 0.0008893056 0.0002055717 0.0012482260 0.0002639770 -0.0004717518 0.0042961711 0.0005590042 -0.0019840490 -0.0014432392 0.0005982533 -0.0005298809 0.0020265081 -0.0080101993 -0.0085710248 -0.0838049882 0.0058520594 -0.1922479572 0.0033593084 -0.0188230092 0.0042201922 -0.0107973814 0.0117819788 -0.0147326110 -0.0095027307 0.0053420787 -0.0145151406 0.0077187706 0.0069935308 -0.0168225191 -0.0033801535 0.0110844793 -0.0016192135 -0.0066981597 -0.0112046696 -0.0024737847 -0.0081864491 -0.0051100363 0.0005484954 0.0051777893 -0.0096430220 -0.0447710577 0.0033345900 0.0017983906 0.0181207795 -0.0025368718 0.0084693720 0.0119311095 0.0015029695 0.0017129692 -0.0065889389 0.0032608007 -0.0038096420 0.0001590599 -0.0033401489 -0.0014464348 0.0010053496 -0.0003204263 -0.0022946747 0.0026179030 0.0182641966 -0.0143373061 0.0096027971 -0.0015730051 0.0013886162 -0.0011573801 0.0010489399 -0.0005020516 0.0003602227 -0.0020466780 0.0015005836 -0.0001814281 -0.0028174903 0.0021618691 -0.0018285746 -0.0010279023 0.0010700804 -0.0009941090 0.0030293078 -0.0026906973 0.0022050200 0.0074510700 -0.0062045654 0.0056687083 0.0214728649 -0.0179367391 0.0122962061 0.0142137146 -0.0099587757 0.0075625750 -0.0001725274 0.0004157077 -0.0005307822 -0.0000117760 0.0010854206 -0.0010741169 -0.0004559124 0.0029124324 -0.0031538367 0.0007757383 -0.0013412115 0.0005725159 -0.0003369587 0.0006719918 -0.0005078011 -0.0010051955 0.0000613699 0.0001047456 -0.0001469389 0.0009460325 -0.0000568550 0.0005851114 0.0002311254 0.0002510405 -0.0002560475 -0.0003329340 0.0003237468 -0.0009498626 -0.0000425160 0.0000661558 0.0003693562 0.0014633553 0.0005771670 0.0023540763 -0.0023754846 0.0009679016 0.0019686800 -0.0024304524 0.0016521385 0.0009828632 -0.0016072618 0.0000594730 -0.0009515449 0.0005429206 -0.0005143276 0.0053072327 -0.0044523402 -0.0008293384 -0.0005258597 -0.0085695747 0.0041433411 -0.0006564512 0.0012977767 -0.0007247903 0.0025199141 -0.0045350909 0.0030547549 0.0015087863 0.0016936184 -0.0029216365 -0.0066205079 -0.0000565807 0.0051523039 -0.0054665326 -0.0025460662 -0.0053419595 0.0037036410 -0.0035204375 0.0054677028 0.0111824454 0.0068857106 -0.0068078560 -0.0008808183 0.0005193497 -0.0005869985 0.0001680673 0.0001353418 -0.0001870514 0.0067707298 0.0086241452 0.0030882155 0.0075410810 -0.0040390281 0.0195505876 0.0011359725 0.0227852729 -0.0338001715 0.0067641343 0.0075479837 -0.0027428015 0.0278560116 0.0075658706 0.0096528067 -0.0120841549 0.0017401917 -0.0079677674 -0.0335715757 0.0083535132 0.0290210885 0.0168980203 -0.0319682749 -0.0194251754 0.0215463580 -0.0324409948 -0.0293507616 -0.0005459720 0.0000499028 0.0004696907 0.0004427871 -0.0008585165 -0.0003955630 -0.0001802357 0.0005966268 0.0005167667 -0.0049384269 0.0044864169 -0.0011896197 0.0043737719 -0.0042716618 0.0010065591 0.0030316612 -0.0006118463 -0.0043624988 0.0060515963 -0.0051974106 0.0011703140 -0.0034199480 -0.0004443328 0.0046985736 -0.0003882164 -0.0020651049 0.0087711741 -0.0004801491 0.0121312020 -0.0062830718 -0.0049341553 0.0195797424 -0.0157458560 -0.0017065790 0.0154659870 -0.0018385992 -0.0244191444 0.0219223941 -0.0127894653 -0.0093618507 0.0169104208 -0.0020382956 0.0031157962 -0.0006067321 -0.0082460108 0.0009006608 -0.0050253139 -0.0068122168 -0.0022356790 0.0104558162 -0.0048142446 0.0023069977 0.0020546913 0.0090476216 0.0038670444 0.0060421474 0.0061552884 -0.0079800409 -0.0045277267 -0.0026071619 -0.0036954820 -0.0263169488 0.0097387222 -0.0101593932 -0.0092562747 0.0022006751 -0.0019126083 -0.0242785822 0.0145096284 -0.0062977093 0.0027615714 0.0042810879 -0.0014123428 -0.0051908902 -0.0007972452 0.0005641763 -0.0039675764 0.0040012880 0.0050107162 0.0005011409 -0.0045271688 0.0044001506 0.0030900606 0.0040070325 0.0376295401 -0.0138977945 0.0696831816 0.0196008949 -0.0002404500 0.0286065924 -0.0391462651 -0.0005199438 -0.0656723052 -0.0261160633 0.0088949952 -0.0348604749 0.1678514935 -0.0424267929 0.2896793050 0.2835553236 -0.0394435146 0.4949314368 -0.0180046362 0.0098428992 -0.0404695780 -0.0307907923 0.0069314558 -0.0570179121 0.2039694153 -0.0247099798 0.2890763568 0.2661110859 -0.0449668752 0.4330150515 -0.0140922240 0.0022255470 0.0232656109 -0.0036692960 -0.0000073560 0.0070247507 0.0116130564 -0.0022237540 -0.0187784161 0.0056216088 -0.0011830278 -0.0089673273 -0.0404359042 0.0044437024 0.0596571884 -0.0844501953 0.0113235430 0.1450327365 0.0105181929 0.0003869570 -0.0142500985 0.0138328348 -0.0004235601 -0.0189067589 -0.0649255926 0.0066418997 0.1230386857 -0.0812072470 0.0088945746 0.1501200445 0.0001198314 0.0002032023 0.0002713616 0.0002682308 -0.0002355304 -0.0002862519 0.0004631329 -0.0002437995 -0.0003364290 0.0012280125 0.0005997205 0.0012626817 -0.0004078261 -0.0002948862 -0.0001184772 0.0009185080 0.0000710037 -0.0000072742 -0.0011260101 -0.0008187705 0.0005338861 -0.0013478573 -0.0018225433 0.0006129895 0.0033287681 -0.0040003653 -0.0004655889 -0.0118977142 -0.0099700011 -0.0207926080 -0.0016677275 -0.0124983841 -0.0007558044 0.0004650001 0.0103950702 -0.0003369157 -0.0008867207 0.0046835559 -0.0045046085 0.0058672294 0.0047328168 -0.0108865412 0.0003888125 0.0105552254 0.0026789475 -0.0017966964 -0.0117008119 -0.0020874678 -0.0067049817 -0.0030031586 0.0048672281 0.0023284434 -0.0118800752 -0.0095183532 0.0036859213 0.0021395865 0.0086570577 -0.0033313289 0.0050644896 0.0039535732 0.0000037479 -0.0003657102 -0.0029244627 0.0019210292 -0.0008960098 0.0016910562 -0.0006350690 -0.0019929426 0.0004232115 0.0024997903 -0.0180043722 0.0078749293 -0.0695712508 0.0653621173 -0.0408973970 0.0069510583 -0.0043462850 0.0065405323 -0.0004460837 0.0030051964 -0.0023553259 0.0048492696 -0.0047272881 0.0082769639 0.0119984675 -0.0084156580 0.0075786709 0.0097875136 -0.0010884260 0.0001503473 -0.0144159804 0.0110154455 -0.0057627983 -0.0329098330 0.0308883110 -0.0130886623 -0.0904089319 0.0762115356 -0.0460890944 -0.0508094782 0.0466663118 -0.0328523730 0.0009764507 -0.0006512355 -0.0052842468 0.0016694888 -0.0093830911 0.0036094883 0.0032763966 -0.0179601624 0.0139483826 0.0033470259 -0.0049659143 0.0010126124 -0.0023356804 0.0019508626 -0.0012979657 -0.0005687187 0.0026555200 -0.0000666943 -0.0027646995 0.0047558888 -0.0007476550 0.0016816412 -0.0008102801 0.0009387469 0.0001428967 -0.0016216319 0.0006036276 0.0010980698 0.0007795487 0.0001083414 0.0057742537 -0.0097755624 0.0005928806 0.0084267527 -0.0113936922 0.0053803727 0.0046744541 -0.0081654270 0.0018092756 0.0021815635 -0.0053104840 0.0004474621 0.0015934414 -0.0065021880 0.0016411333 -0.0384620242 0.0205857691 0.0034719734 0.0012817342 -0.0019987421 0.0007161188 0.0092988909 -0.0175236329 0.0094802154 -0.0313920138 0.0534521934 -0.0394704911 -0.0122512977 -0.0192515662 0.0327449315 0.0569007191 0.0015015912 -0.0485460296 0.0577261090 0.0289486397 0.0566724347 -0.0280682360 0.0334872129 -0.0566722662 -0.1061702246 -0.0642397702 0.0573631816 0.0087595519 -0.0080014639 0.0067740658 -0.0015247350 -0.0012810655 0.0025351599 -0.0709895452 -0.1027621186 -0.0250286359 -0.0819681520 0.0450072839 -0.2111332065 -0.0081687625 -0.2323040555 0.3448775574 -0.0373363881 -0.0731963450 0.0501880300 -0.2815103170 -0.0682013900 -0.0950269655 0.1120501703 -0.0135728954 0.0879243576 0.3231989501 -0.0825937163 -0.2692346951 -0.1697197068 0.3038207854 0.2000467697 -0.1791350536 0.2928712595 0.2627705382 0.0072567442 -0.0003436535 -0.0069192963 -0.0051764124 0.0092284263 0.0052040786 0.0003532751 -0.0036336578 -0.0037646904 -0.0019349661 -0.0010678127 0.0008713570 -0.0002079653 -0.0020449357 -0.0031512589 -0.0004372612 -0.0028293706 -0.0028477826 0.0031342336 0.0019330761 -0.0015427031 -0.0010551408 0.0020785969 0.0040212941 -0.0005650650 0.0024501058 0.0033796577 0.0017069939 0.0006211602 -0.0033210788 -0.0054683889 -0.0016414803 0.0001628912 0.0015343981 -0.0011978386 -0.0001682655 -0.0042505189 -0.0052902271 0.0052666787 0.0034392948 -0.0001513706 0.0027421472 0.0012514580 -0.0011308809 -0.0041010341 0.0002906224 -0.0035444658 -0.0028698786 -0.0017486065 0.0042877903 -0.0017637751 0.0012153846 0.0017462601 0.0037943974 0.0016677753 0.0025442126 0.0021926848 -0.0045385214 -0.0046617797 -0.0010344167 0.0025843626 -0.0089110789 0.0032943870 -0.0045945759 -0.0036237287 0.0015608484 -0.0024636313 -0.0114912188 0.0073696814 -0.0076274836 -0.0044963533 0.0041504579 -0.0018294303 -0.0002091034 -0.0012197176 -0.0009981647 0.0003534323 0.0020506094 0.0024941805 0.0002218967 -0.0025109236 0.0019908232 0.0011212114 0.0017212721 0.0027202409 -0.0051632854 0.0064890729 0.0038363918 0.0026730933 0.0040764415 -0.0040551083 -0.0051058894 -0.0066372422 -0.0042725418 0.0015522284 -0.0033581862 0.0210389650 -0.0104571340 0.0287688064 0.0295300820 -0.0012522975 0.0504722160 0.0010280100 0.0053255775 -0.0065093108 -0.0015492968 0.0010675612 -0.0060757729 0.0251521146 0.0017400047 0.0259861549 0.0310731623 -0.0104216730 0.0436101025 -0.0059818507 0.0036940781 0.0096896525 0.0010063089 -0.0039922027 -0.0030078306 0.0015775515 0.0050509688 -0.0075317572 -0.0016826419 0.0011083151 0.0001751347 -0.0060160378 0.0063036914 0.0005557692 -0.0230109396 -0.0020792692 0.0284547948 -0.0004753647 -0.0053123136 -0.0016333820 0.0057167756 -0.0002139640 -0.0056238291 -0.0233379931 -0.0035214024 0.0314367111 -0.0150076065 0.0048041780 0.0281192476 -0.0017856166 -0.0033263101 -0.0032750194 -0.0055037077 0.0038857808 0.0020479989 -0.0043888838 0.0077618316 0.0092944338 -0.0176866833 -0.0073159545 -0.0199821502 0.0047577729 0.0041413195 0.0008359973 -0.0162794745 0.0009319703 0.0016732988 0.0113624683 0.0070839087 -0.0037496979 0.0145816169 0.0202041172 -0.0089359926 0.0073684125 -0.0046294620 0.0074127678 0.0433208811 -0.0155415243 0.0687982340 0.0011675865 -0.0038533536 -0.0066823167 0.0144074513 0.0019533086 0.0103930027 -0.0051290103 0.0082816294 -0.0144337504 0.0067544190 -0.0033037150 -0.0067104551 0.0199101373 0.0011062163 -0.0185625600 -0.0086556419 -0.0134941128 0.0078720848 -0.0013630725 -0.0051408771 -0.0099755168 0.0927362741 -0.0078839279 -0.2097604604 0.0013587630 0.0063502363 0.0046509145 -0.0040163783 0.0018980152 0.0138551998 -0.0002986632 0.0006056068 -0.0037577482 0.0017906635 -0.0020577325 0.0003870106 -0.0023544857 -0.0010820818 0.0000615143 0.0000842666 -0.0085371155 0.0060836807 0.0286432345 -0.0219191405 0.0149922661 -0.0029073063 0.0026365459 -0.0017976580 0.0022765157 -0.0010363734 0.0003948451 -0.0031327264 0.0022526736 0.0004534517 -0.0041351961 0.0033134913 -0.0026839459 -0.0015152093 0.0030771082 -0.0026597304 0.0043548286 -0.0038462929 0.0035029580 0.0114018067 -0.0095971905 0.0094048431 0.0350048072 -0.0291291301 0.0210761625 0.0227181985 -0.0131970724 0.0110895725 -0.0003699508 0.0005493407 -0.0021925569 0.0001572292 -0.0000150238 -0.0007889724 -0.0003368042 0.0014551426 -0.0021137051 0.0010711413 -0.0012227159 0.0008873875 -0.0006370417 0.0006766360 -0.0010639088 -0.0014949542 0.0008550014 0.0002701409 0.0002547931 0.0013864119 -0.0000363453 0.0008137948 0.0003750569 0.0003241125 -0.0007532684 -0.0006145101 0.0008361004 -0.0003420079 -0.0003235723 -0.0000581167 0.0014319736 -0.0002004926 0.0002720076 0.0030558569 -0.0036035108 0.0025017640 0.0027420403 -0.0040863993 0.0028332481 0.0022263006 -0.0029344162 -0.0001608922 -0.0014686768 -0.0002199439 -0.0004966659 -0.0082648305 0.0072374907 -0.0014759828 0.0134775300 0.0176453397 -0.0081269320 0.0002594432 -0.0002219166 -0.0000006587 0.0001255415 -0.0001230624 -0.0001743667 0.0000695112 -0.0000094769 -0.0003480516 0.0005418631 -0.0002956697 0.0010225599 -0.0012268101 -0.0003866294 -0.0018536223 -0.0019327331 -0.0000014562 0.0010711010 0.0015410870 0.0010160765 0.0001365962 -0.0000689494 0.0000190940 0.0000735207 -0.0000722637 0.0000166185 0.0000828537 0.0007811376 0.0039720931 -0.0018024965 0.0011405551 -0.0006696863 0.0036842683 -0.0005765250 0.0035432687 -0.0055230169 -0.0056842378 0.0007993466 -0.0054148279 0.0055216856 -0.0007836971 0.0008465416 -0.0010481221 -0.0001807326 -0.0030514425 -0.0057917056 0.0018165652 0.0038522301 0.0035115527 -0.0047199306 -0.0045443098 -0.0002092837 -0.0028119437 -0.0021294597 -0.0001730989 0.0000044610 0.0001256115 -0.0002294105 -0.0000756081 0.0001726432 -0.0000816580 0.0000113267 -0.0000191210 0.0033793286 -0.0144186255 0.0074499749 -0.0082519174 0.0041190769 -0.0093918127 -0.0044208062 -0.0061364937 -0.0022445669 -0.0009420137 0.0170067562 -0.0090900733 0.0008855990 0.0048149303 0.0064286178 -0.0026168020 0.0120363535 -0.0014150570 0.0058705323 -0.0171575058 0.0031081728 0.0041557606 -0.0475844416 0.0277483044 0.0112372191 -0.0301569949 0.0030450596 0.0201850158 -0.0540070115 0.0362722323 0.0176264064 -0.0160690354 0.0090670678 -0.0102033475 -0.0056305373 0.0090783649 -0.0034222357 0.0051367854 -0.0000577992 -0.0111855801 -0.0189816493 0.0080800788 0.0035171221 -0.0012347211 -0.0022542821 -0.0051090621 -0.0101280256 0.0073597519 0.0058167718 0.0131212734 -0.0005688525 0.0252792521 0.0566345632 -0.0310634378 0.0190818958 0.0308581394 -0.0075160051 0.0421302809 0.0470292747 -0.0283644425 0.0132160527 0.0070699772 0.0007302369 -0.0052938625 0.0078143544 -0.0042105117 -0.0036604248 0.0089865149 0.0020125879 -0.0056203422 -0.0089303756 0.0033983254 -0.0060001346 -0.0088631928 0.0025341017 -0.0193840990 0.0073880298 -0.0356566736 0.0062528436 -0.0031599033 0.0111682939 0.0121106045 0.0045303825 0.0255837941 -0.0009770301 -0.0009570225 -0.0004431687 -0.0288000484 0.0131251804 -0.0368844358 -0.0829520480 0.0063847891 -0.1320591243 -0.0034511499 -0.0041828945 -0.0005871938 0.0147179190 -0.0038723420 0.0243363493 -0.0806752980 0.0080959538 -0.1091274310 -0.0598755601 0.0096038663 -0.0982367975 -0.0134915343 0.0058826056 0.0216515079 -0.0427015853 -0.0029443222 0.0750931889 0.0144650931 0.0074868346 -0.0320303661 0.0329875024 -0.0017684592 -0.0594046498 -0.2021323121 0.0359913578 0.2827745487 -0.2563947481 0.0304336594 0.4239744459 0.0374508371 -0.0129242510 -0.0712278750 0.0252711823 0.0009788018 -0.0333181445 -0.1743855563 0.0043926859 0.2933640497 -0.2843328307 0.0428187670 0.5055779873 -0.0000104751 -0.0000547991 -0.0001009122 -0.0000841607 0.0002039785 0.0002271465 -0.0001197195 0.0002403633 0.0002629662 -0.0005847143 -0.0003349902 -0.0005942522 -0.0000360003 0.0000788312 0.0000710857 0.0002818930 0.0000828061 0.0000745789 0.0001518899 -0.0000233656 -0.0000098877 -0.0006803380 -0.0006265098 0.0003185352 0.0016540331 -0.0029030760 -0.0014773405 0.0003784848 -0.0098290329 0.0044891595 -0.0011914190 -0.0091085425 -0.0011119667 0.0002217935 0.0057671664 0.0023810805 -0.0012588237 0.0025337007 -0.0001323984 0.0027346740 0.0037160636 -0.0061953662 0.0007138341 0.0064574925 -0.0011261639 -0.0002076919 -0.0046632743 -0.0003351220 -0.0025487144 -0.0004512393 0.0015084960 0.0072264732 -0.0046097151 -0.0130929043 -0.0011133407 0.0000315812 0.0073984373 -0.0034196355 0.0047089761 0.0009673924 0.0013409409 0.0011693419 -0.0018805183 0.0028320938 -0.0014852538 -0.0000862855 -0.0053237599 -0.0000549233 -0.0000311472 -0.0020042567 0.1456892797 -0.1048257320 -0.3534595102 0.2584259991 -0.1851810364 0.0358128137 -0.0370589441 0.0172210076 -0.0394770234 0.0155614729 -0.0051621930 0.0394742881 -0.0273414454 -0.0118214334 0.0502538573 -0.0412290630 0.0296645139 0.0056389376 -0.0402440809 0.0369786127 -0.0463571042 0.0428845540 -0.0431992186 -0.1413562091 0.1173070312 -0.1244510786 -0.4216714582 0.3496101526 -0.2656496818 -0.2792715234 0.1455837602 -0.1259646120 0.0111162468 -0.0089520596 0.0361618002 0.0064542776 0.0061499502 0.0147314217 0.0174630822 -0.0181260135 0.0305574658 -0.0267179275 0.0345682070 -0.0175897773 0.0184866656 -0.0208025958 0.0218784541 0.0240226985 -0.0157232915 -0.0042648615 -0.0025596572 -0.0290329045 0.0004524100 -0.0174995945 -0.0112040580 -0.0085433167 0.0173229625 0.0064359383 -0.0114654722 -0.0169047484 0.0336634953 -0.0056523920 -0.0215253219 0.0087762515 0.0029870830 -0.0837953243 0.1007750410 -0.0628242527 -0.0887318285 0.1296900337 -0.0604393821 -0.0690908475 0.1078754743 -0.0092950783 0.0217724900 0.0181292751 0.0066132854 0.2188629324 -0.1931905020 0.0240886472 -0.0009929937 -0.0039103455 0.0018563794 -0.0068476094 0.0076217255 -0.0027179882 0.0098225780 -0.0156892528 0.0153079359 0.0018165289 0.0065135796 -0.0059681028 -0.0086271326 -0.0009625439 0.0028750715 -0.0065016955 -0.0022562964 -0.0027236972 0.0073753031 -0.0060989305 0.0075958535 0.0105216211 0.0077992565 -0.0075397915 -0.0022289607 0.0027414995 -0.0023314653 0.0012405536 -0.0002168660 -0.0023402791 0.0086208208 0.0020934014 0.0122614700 0.0089715758 -0.0037560351 0.0158419664 0.0022050006 0.0192882769 -0.0333929651 0.0173699414 0.0143477592 -0.0007977172 0.0384959726 0.0130599592 0.0144952289 -0.0205815329 0.0031705294 -0.0112258714 -0.0351440122 0.0085840374 0.0320538202 0.0143370976 -0.0317855976 -0.0157438926 0.0253256140 -0.0351812970 -0.0320060312 -0.0008963466 -0.0001724886 0.0013595150 0.0033901350 -0.0016560551 -0.0035818402 0.0011687640 -0.0002288678 0.0005694416 -0.0002097704 -0.0004997328 0.0004587943 0.0011770989 0.0003510458 -0.0021987650 0.0020914898 -0.0026691344 0.0002972145 0.0011075456 0.0014020430 -0.0011083361 -0.0006208501 0.0004380346 0.0016353119 -0.0007539681 0.0011618841 0.0008898454 0.0005797879 0.0033989187 -0.0036900033 -0.0058159667 0.0054681399 -0.0009149275 -0.0014305032 0.0005479586 -0.0000494431 -0.0004806563 -0.0035813449 0.0031861801 0.0002890999 -0.0004678743 0.0017348085 0.0011744916 -0.0005677409 -0.0031271121 0.0004697262 -0.0022244796 -0.0023622819 -0.0007455020 0.0037665115 -0.0016724774 0.0006094356 0.0007806624 0.0031507259 0.0014045545 0.0023517871 0.0017496920 -0.0004539366 0.0004829513 -0.0025237942 0.0001416711 -0.0086408005 0.0031604690 -0.0033140609 -0.0029362818 0.0006105133 -0.0010287256 -0.0089406866 0.0052335453 -0.0021713300 0.0021807593 0.0001655846 -0.0002351713 0.0000632150 0.0009522069 -0.0003645091 -0.0008635965 0.0000248028 0.0016377038 0.0000653567 -0.0015717297 0.0014953403 0.0009767365 0.0014252914 -0.0015986851 -0.0025270053 -0.0016916997 0.0012630293 0.0022707903 0.0011056891 0.0002826014 -0.0035815111 0.0010719698 -0.0012706150 0.0003485890 0.0005232531 0.0009063137 -0.0038819542 -0.0031965583 -0.0035315789 0.0018267998 -0.0052337975 0.0027355276 0.0035893277 -0.0021406423 0.0022184862 0.0000931208 0.0002063275 0.0021600567 0.0038030679 -0.0065108884 0.0013870480 -0.0049377644 -0.0049050698 -0.0037531331 0.0015511749 0.0058884715 -0.0019823505 -0.0023086529 0.0030723574 0.0017973178 0.0017940339 -0.0046800248 0.0013164139 0.0005454746 -0.0030842520 -0.0123835109 0.0037677169 0.0155938126 -0.0237942232 0.0015443419 0.0364853542 0.0018278407 -0.0033241727 -0.0048664857 0.0040611303 0.0003098424 -0.0044870567 -0.0210264081 -0.0014992896 0.0304791926 -0.0230839021 0.0053566970 0.0413503266 0.0008519963 0.0027109632 0.0022372527 0.0033966600 -0.0040587506 -0.0042237602 0.0038841893 -0.0044258514 -0.0068654543 0.0146765717 0.0081144729 0.0150216457 -0.0021959233 -0.0033218763 -0.0003727376 0.0000116601 0.0005529520 0.0024926272 -0.0106435731 -0.0000484801 0.0025131855 0.0079049480 0.0039255433 -0.0002656094 -0.0072640825 0.0018215772 -0.0114996512 -0.0026079948 0.0006792939 0.0090026071 -0.0015746524 0.0006661656 0.0015916999 -0.0033389233 -0.0010169033 0.0040294186 0.0023797099 -0.0021620561 0.0153369544 -0.0097143763 0.0053437818 0.0013900426 -0.0064521250 0.0034557031 -0.0058987538 0.0020634642 0.0098675738 0.0003969756 0.0033611593 0.0049796622 -0.0058973973 0.0035327525 0.0099781622 0.0006551268 -0.0051642115 -0.0083731900 0.0038322858 -0.0043123409 0.0065279047 -0.0147509295 0.0039890417 -0.0013386099 0.0020793000 -0.0003631761 -0.0023535218 -0.0013028629 0.0088726080 -0.0015876392 0.0014434292 0.0313879781 -0.0746835439 0.0951728670 0.0509289829 -0.0328072234 0.0369501723 0.0024115882 0.0059949584 0.0113041646 -0.0162185794 0.0122873997 -0.0158137893 0.0097016002 0.0063201393 -0.0259544499 -0.0381033960 -0.0048655076 -0.0149874774 -0.0151960759 -0.0111962228 -0.0041723393 0.0426265703 -0.0231275277 0.0085549110 -0.0361738986 0.0117029814 -0.0644717540 0.0928613201 -0.1119162796 0.0303856091 0.0955690295 -0.0872938595 0.0598815170 0.0108975522 0.0360564499 0.0087911490 0.0042530481 -0.0317048825 0.0248128138 0.0253208237 -0.0552269611 0.0056010989 -0.0895832836 0.1266509017 -0.0364194256 0.0499855843 -0.0700470908 0.0252309947 0.0415888538 -0.0540680261 0.0083634532 0.0322551102 -0.0545048095 0.0131902848 -0.0131709688 0.0057406023 -0.0041979396 0.0086359298 0.0055595507 -0.0074696445 -0.0157926046 0.0223563425 -0.0067695549 0.0028786939 -0.0053536903 0.0093843748 -0.2068885614 0.2911387451 -0.0846686072 -0.2380031502 0.3393940566 -0.0925550855 -0.1824850194 0.2597976228 -0.0536955195 0.0038925395 -0.0066039082 0.0025588450 -0.3318428551 0.2973279412 -0.0036084089 -0.0102953734 -0.0167397346 0.0085957278 0.0167755612 -0.0237361672 0.0072501885 -0.0048202071 0.0157867515 -0.0308685064 0.0001396064 -0.0180112790 0.0191005276 -0.0269439630 0.0048075889 -0.0280311874 0.0004770690 0.0315707552 0.0535306418 0.0526748768 -0.0315769171 0.0070102993 -0.0091636078 0.0163926277 -0.0259291582 0.0058607353 0.0016080195 0.0080124160 -0.0027190211 0.0011503300 0.0041773111 0.0076447499 -0.1617613209 0.1539485580 -0.0092114938 0.0395918037 -0.1887821932 0.0242394129 -0.1249635552 0.0906053843 0.1898710027 0.0743570381 0.0927549559 0.0485789880 0.0639846571 0.0395006428 -0.1193075529 0.0244695014 -0.0165473752 -0.0140750947 -0.0019671600 0.0563491875 -0.0547268478 0.0029761348 0.0830272577 0.1105043308 -0.0732054999 -0.0735399561 -0.0110530294 -0.0007859438 0.0057814932 -0.0160470869 0.0019643777 0.0119430856 0.0007277182 -0.0038335532 -0.0104980526 0.0075023630 -0.0111773471 0.0059379172 -0.0011978522 0.0046838228 0.0021648695 0.0024227707 0.0003451103 0.0043510693 -0.0092768099 0.0130896754 -0.0067187354 0.0015330602 -0.0034003476 -0.0008749154 -0.0005199540 0.0029531587 -0.0042428094 -0.0082320671 0.0158050616 -0.0039481211 0.0168013559 -0.0200060634 0.0104760567 0.0048221147 -0.0221609429 0.0046352437 0.0153588318 -0.0225469977 0.0122282593 -0.0076433046 0.0105276310 -0.0056699017 0.0050250012 0.0025464765 -0.0069741113 0.0006295928 -0.0042061934 -0.0032688604 0.0071931622 0.0176087740 -0.0084008558 -0.0011057054 -0.0018098906 0.0073250414 0.0035574139 0.0058714900 0.0021515773 0.0045289864 0.0069937343 -0.0073536528 -0.0172000625 -0.0381236674 0.0174141857 -0.0146351994 -0.0211722691 0.0058298641 -0.0102529597 -0.0238990353 0.0147953777 0.0126135645 0.0224096571 -0.0086676908 -0.0007608856 0.0077856108 0.0005433684 -0.0001337881 0.0066330107 -0.0035088813 0.0051670175 0.0052159159 -0.0031911932 0.0049039977 0.0059768551 0.0004107853 0.0034497547 -0.0036686208 0.0080171367 -0.0058069908 0.0011590666 -0.0102500611 -0.0013873997 -0.0034483993 -0.0020478233 0.0021915780 0.0008328156 0.0060805363 -0.0100414826 -0.0019875685 -0.0266503745 -0.0028309666 0.0019859544 -0.0033148655 0.0047797084 0.0013783197 0.0018612055 0.0003847044 0.0014078955 -0.0064720922 0.0153176839 -0.0002488253 0.0167766388 0.0019628895 -0.0027640344 -0.0067297421 0.0016691760 -0.0049368106 -0.0061125218 -0.0040159640 0.0014930300 0.0079119563 0.0027257105 -0.0091827077 0.0038998041 0.0048406500 -0.0008545462 -0.0034241734 -0.0035932228 -0.0086360897 0.0240874874 0.0004678932 0.0076463183 0.0147321215 0.0036701051 0.0036605301 -0.0024831297 -0.0005232821 0.0022416898 0.0020868159 0.0055527833 0.0036541725 -0.0042859215 -0.0066558903 0.0015059132 0.0145986217 0.0049276320 -0.0026391185 0.0020555787 -0.0065260581 0.0172232608 0.0098804681 0.0018563310 0.0284556249 0.0346106286 -0.0304822221 -0.0099830064 -0.0369584516 0.0037684789 0.0017738274 0.0030508097 -0.0412488119 -0.0091968010 0.0011555389 0.0147720944 0.0148564787 -0.0092665082 0.0037629919 0.0197638289 -0.0209614416 -0.0012655903 -0.0052959996 0.0120114553 0.0141916211 -0.0162521299 0.0449886518 -0.0040472815 -0.0107128094 0.0049740958 -0.0101015148 -0.0023364940 0.0093705172 -0.0116048342 -0.0087646822 -0.0007012755 -0.0382217587 0.0182782659 0.0297111211 -0.0219975178 0.0033926532 -0.0189123887 0.0103640535 0.0464675656 0.0023584262 0.0263393054 0.0198709427 -0.0444001646 0.0272638310 0.0470648850 -0.0115009314 -0.0152103461 -0.0221074028 -0.0089732534 0.0003267403 0.0044942215 -0.0061330457 0.0090030453 0.0025377229 0.0010755313 -0.0023852192 -0.0033358455 -0.0032400673 0.0040462526 0.0086357781 0.0043120929 -0.0149506244 0.0193569020 -0.0327180036 -0.0160276727 0.0115411508 -0.0137771678 -0.0016758108 -0.0014203825 -0.0054292796 0.0102721358 -0.0067206454 0.0078095988 -0.0063186963 -0.0023323647 0.0142115014 0.0177570599 0.0040994297 0.0069518155 0.0092912086 0.0070290346 0.0005027555 -0.0203863272 0.0100993750 -0.0024394646 0.0201790312 -0.0066400590 0.0361760602 -0.0362993458 0.0482070729 -0.0073135108 -0.0391038708 0.0417224019 -0.0272326146 -0.0077286665 -0.0176666592 -0.0068261614 -0.0031554804 0.0157207549 -0.0133840574 -0.0175660805 0.0356604136 -0.0083099814 0.0487371661 -0.0694939968 0.0191316292 -0.0275152494 0.0396420693 -0.0133534780 -0.0236041192 0.0301908178 -0.0049764528 -0.0154226830 0.0267956793 -0.0059922427 0.0070564095 -0.0027795744 0.0030735086 -0.0065431202 0.0006965774 0.0028036227 0.0218235445 -0.0320361629 0.0103481127 -0.0063844298 0.0128807898 -0.0047091614 0.1115952238 -0.1570219975 0.0458878651 0.1445433922 -0.2044075211 0.0546169656 0.1090081710 -0.1562320021 0.0335725345 -0.0031766787 0.0000707445 -0.0031080985 0.1382697387 -0.1238576742 -0.0005370376 -0.0641544277 -0.0884303848 0.0452170592 -0.0031333485 0.0013082454 0.0018835438 -0.0121066378 0.0177365506 -0.0099227060 0.0068039768 -0.0124956452 0.0123101662 -0.0392348113 0.0056831502 -0.0404515450 -0.0068541181 0.0364460402 0.0730042045 0.0808297392 -0.0561162559 0.0116275490 -0.0187667289 0.0205462329 -0.0378198543 0.0078650821 0.0019509331 0.0034077477 0.0038285708 -0.0004460134 -0.0021875319 0.0251621315 -0.2194366849 0.2318766724 0.0016831487 0.0447881450 -0.2230298461 0.0371808832 -0.1399149312 0.0790269731 0.3100589216 0.1222260654 0.1539049560 0.0831114417 0.1110837957 0.0687745619 -0.2204784208 0.0416557330 -0.0431329881 -0.0026338254 -0.0086624822 0.0699768583 -0.0905635212 0.0203715981 0.1338656149 0.1621199887 -0.0970674833 -0.0995143455 0.0019282785 -0.0016805583 -0.0071088666 -0.0023906947 -0.0007338779 0.0011143986 0.0058578033 -0.0025653755 -0.0105981645 -0.0147120008 0.0373089495 -0.0203357369 0.0104540476 -0.0072280088 0.0112660966 0.0014994399 0.0142082830 0.0000243090 0.0083880572 -0.0395892969 0.0223686105 -0.0001708572 -0.0007541146 -0.0135884392 0.0061062503 -0.0193329006 0.0002005276 0.0166821883 -0.0271414465 0.0205009171 -0.0101836433 0.0647919272 -0.0353427352 -0.0198918949 0.0540974650 -0.0074445862 -0.0238713765 0.0852075007 -0.0551567562 0.0013238818 -0.0210923772 0.0057610030 0.0232732942 0.0209863026 -0.0243609483 -0.0079581873 -0.0208089749 -0.0006386354 0.0508290144 0.0921757569 -0.0460986904 -0.0053927573 -0.0118758797 0.0256868481 0.0231904014 0.0325697409 -0.0015231171 0.0532410074 0.0714295954 -0.0445819008 -0.0939839081 -0.1641118188 0.0816857083 -0.0757699599 -0.1162549649 0.0315149585 -0.0864275398 -0.1593839706 0.0859867948 0.0548538574 0.0877986506 -0.0368067250 0.0096534669 -0.0145567711 0.0055755266 0.0040363013 -0.0165763643 -0.0029765816 0.0258423245 0.0307608080 -0.0119982857 0.0217564015 0.0351783550 -0.0032942772 -0.0226943573 0.0039410172 -0.0405390392 0.0203739886 0.0046650745 0.0351788663 0.0103137062 -0.0093141964 0.0106165196 -0.0059565687 -0.0046414621 -0.0175402326 0.0343307071 -0.0144785501 0.0554624153 -0.0140729337 0.0020884765 -0.0405848266 0.0030186848 0.0136220711 -0.0130557231 0.0143354830 -0.0026514587 0.0217507829 -0.0415722187 0.0199807667 -0.1039347731 -0.0130560252 -0.0076344526 -0.0309714985 0.0227672664 -0.0248803367 -0.0535495351 -0.0332077511 0.0039232930 0.0627770258 0.0020473842 -0.0361660254 0.0235678636 0.0245959352 -0.0007742681 -0.0351683667 -0.0605007383 -0.0287763951 0.1677691050 -0.0173950998 0.0320572399 0.0731812080 0.0222268892 0.0112528674 -0.0201548797 -0.0047544627 0.0127932949 0.0232851558 0.0421833952 0.0102810973 -0.0641665063 -0.0380038017 0.0074518794 0.0918699544 -0.0018379492 0.0006398129 0.0003114484 0.0004476574 -0.0053347294 -0.0045099563 0.0003790321 -0.0044792483 -0.0056537101 0.0069243144 0.0043948742 0.0077604124 -0.0029790286 -0.0003788406 0.0007475931 -0.0028798006 -0.0001751079 -0.0002828202 0.0003631839 -0.0093798437 0.0054055404 -0.0031556454 0.0016657906 -0.0065378424 -0.0086225897 -0.0011134292 -0.0009935069 0.0060371418 -0.0082733739 0.0430288292 -0.0052874323 -0.0044822213 0.0056588808 -0.0110090919 -0.0027603838 0.0096389040 -0.0072713963 -0.0082106074 0.0118900264 -0.0326190873 0.0198926270 0.0207342029 -0.0218243364 0.0056395829 -0.0166839879 0.0063829480 0.0390157337 -0.0000738337 0.0171553923 0.0194478271 -0.0379065556 0.0194107191 0.0394275068 -0.0066842182 -0.0114840777 -0.0196229822 -0.0015621233 -0.0014408672 0.0069298080 -0.0150384853 0.0092870699 0.0001250744 0.0016165909 0.0016806094 -0.0035354414 -0.0026677863 0.0068750331 0.0037049733 0.0030168596 0.0102396077 -0.0171049432 0.0281025175 0.0139489334 -0.0098499415 0.0115547329 0.0011493685 0.0017866434 0.0039336291 -0.0063859817 0.0044070019 -0.0050783420 0.0042890906 0.0017012688 -0.0102155261 -0.0129930912 -0.0020653314 -0.0049308794 -0.0058570186 -0.0049802397 -0.0004467843 0.0144474218 -0.0075873692 0.0021766863 -0.0134823686 0.0044132177 -0.0249714895 0.0292610314 -0.0365266058 0.0077157076 0.0293000676 -0.0306573609 0.0195585573 0.0036540444 0.0126406623 0.0048868587 -0.0008829970 -0.0107217527 0.0070974018 0.0079778970 -0.0222334646 0.0021405996 -0.0297173603 0.0413638821 -0.0113468089 0.0167642953 -0.0246850865 0.0082638635 0.0151061966 -0.0206864897 0.0031970565 0.0080035730 -0.0124512393 0.0031043976 -0.0030022902 0.0026798931 -0.0006845606 0.0053317237 -0.0027627636 -0.0016255194 -0.0232491179 0.0318740182 -0.0102510105 0.0108471799 -0.0153158046 0.0040187617 -0.0643607784 0.0934097110 -0.0253968996 -0.0967648735 0.1370243275 -0.0359500287 -0.0739745299 0.1015537722 -0.0219170788 0.0018497883 -0.0021152499 0.0003646309 -0.1178491080 0.1076058856 -0.0015928990 -0.0605362938 -0.0789134079 0.0402204667 0.0016500529 0.0008730157 -0.0020686381 0.0110524756 -0.0184349929 0.0126659891 -0.0061639824 0.0166614418 -0.0144999528 0.0404735745 -0.0058299339 0.0509346316 0.0158023425 -0.0440045701 -0.0853398547 -0.0874796723 0.0690601014 -0.0213276571 0.0217755167 -0.0273025287 0.0406246020 -0.0100550319 -0.0042652704 -0.0051768797 -0.0037856653 0.0002864277 0.0019821759 -0.0366769089 0.2585477507 -0.2888770157 -0.0090136758 -0.0533286579 0.2683511175 -0.0428852716 0.1698348331 -0.0816048976 -0.3437958931 -0.1572082065 -0.1513804732 -0.1350545306 -0.1310384179 -0.0896830231 0.2746255430 -0.0491472111 0.0741923907 0.0179132687 0.0043255080 -0.0905588016 0.1019219002 -0.0185937965 -0.1502045532 -0.1811915024 0.1127099874 0.1142387997 0.0012662268 0.0021433161 0.0053034217 0.0061170029 0.0007236086 -0.0033969139 -0.0078245553 0.0051992956 0.0152106195 -0.0025508142 0.0141199859 -0.0079938408 0.0063239002 -0.0000426920 0.0098239009 0.0041706047 0.0096186156 0.0053370585 -0.0034250466 -0.0147703080 0.0089823637 0.0016066582 -0.0034457389 -0.0113012481 0.0034208017 -0.0100983044 -0.0050946293 0.0017692751 -0.0004599806 0.0085630930 0.0081219274 0.0290368039 -0.0153580019 -0.0098542046 0.0167924749 -0.0011233714 0.0014535570 0.0329077600 -0.0244282738 -0.0045021140 -0.0074037840 -0.0013020271 0.0227686189 0.0188970603 -0.0213137642 -0.0101691839 -0.0269194776 0.0032914409 0.0496784609 0.0895306350 -0.0448436623 -0.0032707969 -0.0116695176 0.0236807858 0.0244474517 0.0300192288 -0.0040669650 0.0624883931 0.0745411716 -0.0469472529 -0.0724205668 -0.1387785456 0.0708082666 -0.0744393721 -0.1068701425 0.0288877730 -0.0872386488 -0.1612328348 0.0857362302 0.0467662318 0.0679423338 -0.0279816617 0.0061670060 -0.0029525967 0.0049277130 0.0028542705 -0.0053747546 -0.0056530472 0.0256618210 0.0272221704 -0.0134898990 0.0194842616 0.0343694114 -0.0007767859 -0.0136267243 -0.0006742306 -0.0222491569 0.0108676353 0.0037481575 0.0186564635 0.0059367070 -0.0105389765 0.0049711229 -0.0029956576 -0.0023679585 -0.0088206372 0.0211151478 -0.0141331965 0.0239518554 -0.0073601711 0.0030031764 -0.0243171966 0.0057844902 0.0109218559 -0.0087262953 0.0109885884 -0.0003479085 0.0097184521 -0.0164036327 0.0140372683 -0.0590256594 -0.0032748847 -0.0079368164 -0.0215384683 0.0174011883 -0.0231721651 -0.0438894455 -0.0269184993 0.0032250463 0.0507323231 0.0028781092 -0.0346765443 0.0194889788 0.0194517382 -0.0001037129 -0.0286666515 -0.0443366780 -0.0292177006 0.1391914190 -0.0140320478 0.0283926155 0.0610682877 0.0203239841 0.0114019542 -0.0145140149 -0.0008447693 0.0121697710 0.0201988252 0.0372961600 0.0107527205 -0.0520798608 -0.0257992931 0.0043181519 0.0757437509 0.0006308237 -0.0012398477 -0.0014821134 -0.0010111909 0.0029299328 0.0016231580 -0.0009391830 0.0018582023 0.0023066924 -0.0047767613 -0.0039993309 -0.0056112350 0.0036444962 0.0008392578 -0.0016867559 0.0067279155 0.0010900833 -0.0008134507 -0.0004909177 0.0072639850 -0.0047211052 0.0042906020 -0.0032889293 0.0096769918 0.0145907665 -0.0506264076 0.0703261536 -0.0061134109 -0.0900827769 -0.0304299367 -0.0125458988 -0.0871281948 0.0054268678 -0.0597661336 0.0011827270 0.0328204736 -0.0807121986 -0.0246560108 -0.0203800531 0.0170009810 0.0175758356 -0.0771444216 -0.0160166796 0.0177637635 -0.0221110042 -0.0243781286 -0.0204939255 -0.0159181852 -0.0549319866 -0.0052122933 0.0550135277 -0.0131851477 -0.0148262585 -0.1164650570 -0.0120707189 -0.0109658148 0.0770995885 -0.0161095880 0.0618760746 -0.0212212483 0.0247510162 -0.0036454811 -0.0055735396 0.0150292786 -0.0215889120 -0.0103034818 0.0019316329 0.0041133966 0.0106921862 0.0067040091 -0.0113221276 0.0219308606 0.0184288034 -0.0039227277 0.0131826191 0.0016902496 0.0048768432 0.0072104417 -0.0019129725 0.0039001870 -0.0062516268 0.0022533338 0.0031665999 -0.0042170196 -0.0124562212 -0.0008523387 -0.0038979138 0.0008752024 -0.0031164710 -0.0031843181 0.0112923871 -0.0073974197 0.0036710773 -0.0130086577 0.0075678209 -0.0158948340 0.0269946806 -0.0328672094 0.0114964447 0.0342603874 -0.0245174050 0.0166576413 0.0035110384 0.0088182027 0.0005548155 -0.0031159264 -0.0121446774 0.0013948014 0.0061177852 -0.0257084761 -0.0026974751 -0.0248517195 0.0322358322 -0.0090492227 0.0131044488 -0.0186684983 0.0035681613 0.0091984737 -0.0200962629 0.0040867631 0.0095613378 -0.0090241386 0.0045718135 0.0010888375 0.0068785672 0.0021090749 -0.0001425502 -0.0003459272 -0.0010210454 -0.0089589599 0.0036618169 -0.0011195842 0.0128873155 -0.0049963422 0.0085042328 -0.0435815064 0.0716182455 -0.0138687380 -0.0627255267 0.0923451229 -0.0178307006 -0.0508272437 0.0629960872 -0.0158365842 -0.0012975008 -0.0079062727 -0.0014488979 -0.1384497553 0.1169798213 -0.0028444750 0.0547247603 0.0526871280 -0.0275828761 0.0025800426 -0.0022568235 0.0001926653 0.0018139647 -0.0013726637 -0.0013834752 -0.0010854502 -0.0008194584 -0.0004578041 0.0031289957 0.0001132746 0.0041264729 -0.0005581779 -0.0018831420 -0.0063624813 -0.0081070100 0.0025295066 0.0001304556 0.0021462802 -0.0005873427 0.0010926691 -0.0000583503 0.0005812290 0.0005263576 -0.0007447979 0.0001710550 0.0007280454 -0.0020791986 0.0171193639 -0.0174809988 -0.0010581610 -0.0023301549 0.0130556776 -0.0038542272 0.0085641664 -0.0054426479 -0.0224249711 -0.0023565179 -0.0169438814 0.0045899076 -0.0063680304 -0.0028663247 0.0055672190 -0.0016695680 -0.0021629345 -0.0018183299 0.0007890134 -0.0009374301 0.0059453756 -0.0035588073 -0.0077745153 -0.0053835514 0.0022708562 0.0024952671 -0.0019942688 0.0000253591 0.0022858599 -0.0017946659 0.0003863615 0.0014034500 -0.0002771191 -0.0005755207 -0.0004801671 -0.0778560031 0.1825886273 -0.0982980655 0.0475884880 -0.0397157405 0.0512470583 0.0035275930 0.0662174207 -0.0101272838 0.0485093545 -0.1901515448 0.1062609761 -0.0058861512 0.0025373190 -0.0551950390 0.0285157588 -0.0848968709 0.0112026617 0.0918434734 -0.1519261872 0.1072719463 -0.0453844088 0.2890762466 -0.1677975044 -0.0873692835 0.2535338874 -0.0337439499 -0.1254620116 0.3867646888 -0.2468126776 0.0216628838 -0.1197426271 0.0510231655 -0.0071634121 -0.0300655691 -0.0111851820 0.0206715018 -0.0070594503 -0.0309325692 -0.0617468647 -0.0513964248 0.0283457631 0.0152871158 0.0173575834 0.0157152610 -0.0092578591 -0.0125532800 0.0284090364 -0.0667147381 -0.0840240955 0.0224152031 0.1038475236 0.0569270801 -0.0443890423 0.0381519840 0.0879080488 -0.0248831288 0.1032111489 0.0856285430 -0.0382225964 -0.0537678789 -0.0451034153 0.0370640020 0.0408658177 -0.0663870285 0.0198055637 0.0162923335 -0.0762606628 -0.0091256970 -0.0082632424 -0.0310356997 -0.0079152048 -0.0056429482 -0.0251390616 0.0214347613 -0.0448131679 0.0030787391 -0.0803539858 0.0390901684 0.0408639906 0.0716708409 0.0254163391 -0.0381765592 0.0169302296 -0.0079543513 -0.0243897604 -0.0351935749 0.0706193338 -0.0488271399 0.1032202692 -0.0243459705 0.0010824116 -0.1016118494 0.0387824884 0.0704852728 -0.0364877521 0.0340614167 -0.0094136185 0.0423145347 -0.0264381220 0.0797546290 -0.2450548252 -0.0254046343 -0.0591449942 -0.1013601231 -0.0137559380 0.0025485080 0.0238735886 0.0065545181 0.0142932628 -0.0152714022 0.0145304642 -0.0116746863 -0.0016752579 0.0075828811 -0.0107916854 0.0192135094 0.0372378059 -0.0148959688 -0.0380785734 0.0138346453 0.0018430741 0.0271871855 0.0075882995 0.0221975212 0.0060926046 0.0067871695 -0.0049869475 -0.0147859563 -0.0080399317 0.0240008290 0.0856683894 -0.0108813354 -0.0093437727 0.0241903589 0.0011353755 -0.0001801921 0.0003206107 0.0005180294 0.0029190767 0.0044461512 -0.0013875909 0.0019173938 0.0036465489 -0.0046839250 -0.0028254181 -0.0044045099 0.0009755316 0.0014841413 0.0007961833 -0.0022594599 -0.0034522193 -0.0030316581 0.0081356071 0.0039622374 -0.0046803512 -0.0041742649 -0.0011444668 -0.0003831894 -0.1089876806 -0.0001035573 -0.0655997567 -0.0691107583 0.0098448545 0.1169606549 -0.0491804231 0.0090620655 0.0252255888 -0.0801613234 -0.0296668985 0.0963204592 -0.0535782210 -0.0523453833 0.1461223956 -0.0547614835 0.0771997826 -0.1314777816 -0.0836126516 0.0558460804 -0.0878400716 -0.0345487152 0.0373372227 -0.0230516275 -0.0865420610 0.0429777516 0.0551709975 -0.0374824528 0.0456005998 -0.1104474638 -0.0762456558 -0.0857433672 0.1797078801 -0.0414868070 0.0795616743 -0.2059331399 0.0820315028 -0.0028231190 0.0088429993 0.0206662655 -0.0466046178 -0.0390119713 0.0315983461 0.0398608530 0.0440616294 -0.0145313274 0.0813858798 -0.0480505319 -0.0148339483 -0.0189654452 -0.0040214661 0.0004792011 -0.0085716073 -0.0106605838 -0.0118702992 0.0009308087 0.0089203365 0.0026692826 -0.0052315420 -0.0119722243 0.0036792503 0.0072423743 -0.0006723090 -0.0134714847 -0.0058183833 0.0131848486 0.0033445898 -0.0037986808 -0.0007638233 -0.0047178670 0.0035798634 -0.0166206443 0.0121222220 0.0000694604 -0.0032222384 -0.0140145430 -0.0242380172 0.0074715952 -0.0051174361 -0.0092652773 0.0162609259 -0.0118028837 0.0162543188 -0.0034641914 -0.0149178671 0.0166392556 0.0036276971 0.0387458267 -0.0605437447 0.0137101636 -0.0199429310 0.0322031842 -0.0002468538 -0.0122065143 0.0195756072 -0.0096241576 -0.0216669682 0.0234814565 -0.0081732936 -0.0016745766 -0.0079466981 0.0009219520 0.0092715084 -0.0000587666 -0.0059289520 -0.0163633927 0.0214269115 -0.0049179457 0.0098169993 -0.0012162523 0.0084871717 0.0869709797 -0.1279744784 0.0185377749 0.0904678921 -0.1211083160 0.0154463609 0.0659992009 -0.1024050913 0.0321007757 0.0083084586 0.0096576987 -0.0095520627 0.0079110500 0.0196074831 -0.0035884200 0.0271325527 -0.0042373427 0.0006737526 -0.0040159719 0.0045612897 -0.0000218354 -0.0025488063 0.0019060438 0.0039085366 0.0027343221 0.0024031816 -0.0014921686 -0.0010941430 -0.0019879367 0.0043264763 -0.0007141667 0.0028475216 -0.0020842319 -0.0012344621 -0.0011476012 -0.0023503814 0.0002439548 0.0030254470 -0.0059967704 -0.0005992763 -0.0011880417 -0.0007969372 0.0016206234 -0.0006176285 -0.0019823631 -0.0006593151 -0.0056248922 0.0015778358 -0.0024203003 0.0032491517 -0.0094198120 0.0006818584 0.0018917146 -0.0051494646 0.0099825282 0.0034220056 0.0067177499 -0.0009447200 0.0021251885 -0.0009527382 -0.0167176588 0.0038982833 -0.0010338446 -0.0023021248 -0.0008117836 0.0122544486 -0.0073065872 -0.0030798018 0.0126879223 0.0241522938 -0.0164669411 -0.0163271377 0.0036635471 -0.0002854447 -0.0041125684 0.0038334561 -0.0004708808 -0.0031191377 0.0002171044 0.0013449169 0.0012708155 0.0582830174 -0.0626643855 0.0312199752 0.0211714910 0.0620606568 0.0501332686 0.0610742258 0.0348116473 0.0789483734 -0.0973051089 0.0628825141 -0.0300546017 0.0258876000 -0.0420044033 -0.0681642500 0.0005713957 -0.0013736893 -0.0728465698 -0.0690451617 0.1537553550 -0.0129412028 0.1758709748 -0.0258701638 0.0354884021 -0.0116804675 -0.1182018912 0.0270030492 0.1822751348 -0.1335929779 0.0340637514 -0.0503291864 0.0135882809 -0.0463776001 0.0193779780 -0.0459461646 -0.0622480832 0.0400773622 -0.0586955816 -0.0723141964 -0.0674379033 0.0196040991 -0.0027975222 0.0293117666 0.0206487963 0.0778579374 0.0123083134 0.0123916582 0.0625477090 -0.0479202201 -0.0695748958 -0.0304755439 0.1380299918 -0.0923489391 0.0088923545 -0.0255542006 0.0401144738 -0.0135627949 0.1274346158 -0.0224181002 0.0326535039 -0.0233032803 0.0433334407 0.0178151238 0.0208183038 0.0440818838 0.0385947134 0.0119396209 0.0307906546 -0.0546120125 0.0189087006 -0.0301332928 -0.0398035611 0.0174745366 -0.0067764395 0.0492341987 0.0205266625 -0.0430423216 0.0660541675 -0.0565089528 0.0388806758 -0.0867847008 0.0054153477 -0.0748966209 -0.0185603555 0.0340640320 -0.0106517562 0.0485053925 -0.0808299127 -0.0627580021 -0.2891008524 -0.0262162263 0.0264065555 -0.1030378295 0.0773739469 0.0599678871 -0.0039887180 0.0224407543 0.0144504645 -0.0616302747 0.2067848843 0.0405757847 0.1194299359 0.0357723070 -0.0612076463 -0.0957479811 -0.0449058295 -0.0346232551 0.0415180476 0.0137057937 0.0344191815 -0.0292198699 0.0534603283 -0.0983972163 0.0146177224 0.0287815456 -0.0211570875 0.0413431198 0.1399156206 -0.1129091863 -0.0195602006 0.0622548040 0.0588299942 0.1001069058 0.0332525478 0.0698766821 0.0161278586 0.0256391511 0.0088031358 -0.0261111421 -0.0022103896 0.0752114588 0.1846844538 -0.0175635825 -0.0147616488 0.0833651335 -0.0031206861 -0.0009527180 -0.0027009415 -0.0003408640 -0.0068579721 -0.0064451970 -0.0012921037 -0.0072045272 -0.0098120235 0.0060310838 0.0011031176 0.0073501485 0.0002894619 0.0020940272 0.0001656537 0.0097206277 -0.0024095206 -0.0060944869 0.0077041825 -0.0029326013 -0.0012832405 -0.0027870023 -0.0044554860 0.0069565209 -0.0118347030 0.0288062493 -0.0398638867 0.1683137468 0.0460906377 0.2122958864 0.0405300455 0.0777060688 0.0116815709 0.0096077709 -0.0518124106 -0.0818014419 0.0529451502 -0.0186577689 0.0329665859 -0.0527013296 0.0007399216 0.0172311499 -0.0311598877 -0.0431034854 -0.0827456725 -0.0170878321 0.0829830884 0.0101940257 0.0093156609 0.0262000211 -0.0262984383 -0.1538017646 0.0841431460 0.2137368069 -0.0790485008 -0.0563001516 0.0624627126 0.0585089546 -0.0770021811 0.0584181465 0.0085812736 0.0507331568 -0.0673030738 -0.0014409171 -0.0036369671 0.0016231216 0.0016112580 -0.0020438977 0.0035229212 0.0060029332 -0.0347562556 0.0372844645 -0.0004273217 -0.0017308469 -0.0005253579 0.0005650844 -0.0009522223 -0.0008876033 -0.0025399665 0.0002979593 0.0016742980 0.0014781684 -0.0002124975 -0.0035812914 -0.0019327714 -0.0017090546 -0.0016739287 -0.0045052631 -0.0037673430 0.0026367045 0.0029602483 -0.0012850083 -0.0004518529 -0.0020494449 -0.0000863524 -0.0067690792 0.0024168066 -0.0051650823 -0.0056479795 -0.0029182635 -0.0082184689 0.0030280939 -0.0008477327 0.0080656750 0.0021214747 0.0010539468 0.0002089059 0.0041879696 -0.0021669820 0.0106946839 -0.0049251577 -0.0007128495 0.0001941644 -0.0010045545 0.0014835922 -0.0008318456 0.0039837293 0.0028324287 -0.0008920086 -0.0014747816 -0.0041163452 0.0011842093 -0.0016998210 -0.0030456636 -0.0028553295 -0.0011196199 0.0054031369 -0.0010935362 -0.0021286260 -0.0097686296 0.0153482128 -0.0037167704 0.0050846516 -0.0070006309 0.0039586169 -0.0029375560 0.0003214642 -0.0074126349 -0.0138364582 0.0202507930 -0.0116656163 -0.0113012199 0.0168358671 -0.0002662565 0.0024249374 0.0037372424 -0.0019352315 0.0042101095 -0.0104187745 0.0037391577 0.0004849302 -0.0036689500 0.0012743477 0.0026910464 -0.0039606228 0.0011085357 -0.0006219295 0.0017606476 -0.0051694565 -0.0002828120 -0.0009553614 0.0022274719 -0.0008216216 -0.0015650446 0.0003948381 0.0029506741 0.0031110307 0.0011268004 0.0001644255 0.0037782801 -0.0022788112 0.0011558972 0.0018035173 -0.0002887747 -0.0001045357 -0.0007216499 0.0006461994 -0.0008531946 0.0003072374 0.0010215154 -0.0047744320 -0.0068854175 -0.0029317067 -0.0054378386 0.0041225389 -0.0152605643 0.0002039294 -0.0100443692 0.0138969789 -0.0051138898 -0.0082130629 0.0034585298 -0.0128071154 -0.0058646220 -0.0054816560 0.0148313707 -0.0010625064 0.0094228499 -0.0068504800 0.0021487985 0.0058916927 0.0019097061 -0.0051813550 -0.0021083034 0.0017895956 -0.0047793323 -0.0040155690 -0.0012851498 0.0001658048 0.0006791412 -0.0019302908 0.0003763826 0.0016883970 -0.0009364381 0.0003458155 0.0002380253 0.0038902387 -0.0129468271 0.0063011494 -0.0083459531 0.0006392204 -0.0113446180 -0.0088521616 -0.0093673046 -0.0067601704 0.0007099385 0.0185260712 -0.0105448779 -0.0023171501 0.0007680286 0.0158297273 -0.0017998061 0.0026750683 0.0103420057 0.0026085745 0.0008016773 -0.0076756804 -0.0102831597 -0.0398305363 0.0218006406 0.0126829930 -0.0210554045 0.0020409651 -0.0166092667 -0.0033906151 0.0110211198 -0.0186842907 0.0494318651 -0.0223330743 0.0068930746 -0.0042721855 -0.0129773245 0.0092809879 -0.0101252258 -0.0127071366 -0.0044759530 0.0117422514 -0.0046869068 0.0050557311 -0.0007135117 0.0174563397 0.0007301724 -0.0034818735 0.0136850490 -0.0130919780 -0.0145777403 -0.0029161552 0.0101186272 -0.0403623242 0.0147035424 -0.0131694037 -0.0042504940 0.0008974835 0.0342548191 0.0081572433 0.0012372195 0.0257546506 0.0422341155 -0.0169024215 -0.0065786983 0.0044861192 -0.0056094297 -0.0022703049 0.0068233444 0.0057636384 0.0053918698 -0.0019222396 -0.0080294759 0.0043662406 0.0025968541 0.0080991177 -0.0522651298 0.0473002838 -0.1223226200 0.0841736372 -0.0601865765 0.1396659930 -0.0011366467 0.0486292754 0.0217236445 -0.0444343296 0.0126897765 -0.0640264550 0.1396414352 0.0241430506 0.3570974192 0.0169145020 -0.0270576508 0.0908641907 -0.0603178453 -0.0546031011 -0.0067003223 0.0186871056 -0.0042842257 0.0694502076 -0.2752194819 -0.0185698384 -0.2232600917 -0.0305376240 0.0614368578 0.0307730381 -0.1033203208 -0.0346003514 0.1471950699 0.0688564034 0.0336641097 -0.1308127237 0.0442682697 -0.0740304859 -0.0127233398 -0.0203083489 -0.0007465227 0.0766040729 0.2661940463 -0.1035619461 -0.2438671720 0.0576755513 0.0478788181 0.0239001979 0.0159907876 0.0497337058 0.0281093663 0.0473158460 -0.0012451293 -0.0662482916 -0.1191130855 0.0625839208 0.3668204248 -0.0110192771 -0.0272165633 0.0715266160 0.0006531266 -0.0009404893 0.0001164590 -0.0025536977 0.0029259464 -0.0008125496 0.0014018772 0.0067577994 0.0074960906 -0.0051203624 -0.0010289535 -0.0076191485 0.0001815580 -0.0005104448 -0.0005127812 -0.0086581811 0.0014044335 0.0030933412 -0.0034559055 0.0000210764 0.0012873673 0.0043380996 0.0044584554 -0.0023808288 -0.0115307750 0.0019715820 -0.0047958679 -0.0011828712 0.0061214394 0.0228817864 -0.0046998798 0.0074248669 0.0031939652 -0.0047787757 -0.0027427186 0.0030103055 -0.0002437858 -0.0063081369 0.0107669027 -0.0056324643 0.0082358411 -0.0048753708 -0.0072317886 0.0040931295 -0.0078778387 -0.0061527164 0.0014995584 -0.0028211303 -0.0083780551 0.0041633243 -0.0009199693 -0.0100834387 0.0022136706 -0.0056666417 -0.0033251684 -0.0054328323 0.0113598729 0.0011087061 -0.0033763602 -0.0114092849 0.0088573554 0.0056025470 0.0005001650 -0.0036748813 -0.0009822805 0.0001676073 -0.0011377196 0.0000246861 0.0082049951 -0.0454345899 0.0590347107 -0.2847440878 0.0552436723 0.1817670389 -0.0116000755 0.0054351613 0.0572931740 0.0661657565 0.0858174293 -0.0098269505 -0.0720360793 -0.0629552706 0.0307876701 0.1724166768 0.0509811482 0.0274080392 0.0363776353 0.1432918645 0.1118592284 -0.1060490216 -0.0879181398 0.0117236384 0.0317848360 0.0057547974 0.0898205621 0.2601732744 -0.1175478799 0.1657351296 0.0962769842 0.1136836904 0.2904937098 -0.0911796394 -0.0005414119 -0.1459992471 -0.1411110424 0.0071772590 -0.0502013451 -0.1371955721 0.0022602336 -0.0612600506 -0.1145050240 -0.0559897276 0.0887870137 -0.0079778003 0.0272711612 -0.0621975392 -0.0775410310 -0.0551654982 -0.0616736469 0.0629391603 0.0855594752 0.0374669443 0.0356044740 0.0950099505 0.0870536064 0.0480127393 -0.0947522226 -0.0504263649 0.0909787409 -0.0689660258 -0.0243573926 0.0087660495 0.0872161145 -0.0080656916 0.0028795081 -0.0595659097 0.2207617331 0.1623368579 -0.1676231631 0.2257795838 0.1759105506 -0.1089695159 0.1424533088 -0.1237112961 -0.0930660566 -0.1140856331 -0.0109987003 0.1350695147 -0.2293087516 -0.0478177350 0.0007101717 -0.0010479366 0.0004115449 -0.0145449569 0.0183141168 -0.0012215016 -0.0007219330 -0.0090419359 0.0278849527 0.0074874083 0.0075361490 -0.0058900487 -0.0016260216 -0.0000728503 0.0012234275 -0.0044777251 -0.0030432996 -0.0026380930 0.0034792144 -0.0086497258 0.0028076294 -0.0015844137 -0.0007592543 -0.0033866685 -0.0037648550 -0.0010732030 -0.0048628667 0.0033860789 -0.0017398134 -0.0059033365 0.0061640197 0.0062322617 0.0049289243 0.0057036929 -0.0043291587 0.0186659898 0.0006188010 0.0163056759 -0.0239602113 0.0219849041 0.0164541917 0.0021924198 0.0219302835 0.0128131551 0.0097262331 -0.0371055441 0.0044556293 -0.0136079170 0.0072938758 -0.0035263048 -0.0005207982 -0.0074507129 0.0054972241 0.0110272332 0.0121133398 -0.0036082584 -0.0045956062 0.0116748232 0.0004555155 -0.0074520687 0.0169623463 -0.0017333830 -0.0138501843 -0.0006336085 0.0040784096 0.0071455491 0.0043630551 -0.0083138789 0.0050116256 0.0011934190 0.0067269382 0.0002784785 0.0066632435 -0.0002631966 0.0068686386 -0.0079059982 0.0095208927 -0.0042995741 0.0039395985 -0.0042250241 -0.0035335373 0.0011914701 0.0012400643 -0.0053348331 -0.0009347503 0.0103499484 -0.0018762434 0.0100918556 -0.0039130153 0.0061840830 -0.0017565076 -0.0149923975 0.0035113543 0.0145168413 -0.0087390195 0.0027929847 -0.0052579906 0.0110714237 -0.0098574376 0.0020148979 -0.0035971032 -0.0055378090 0.0037079162 -0.0053133183 -0.0067201069 -0.0052621828 0.0031117790 -0.0011363458 0.0036647414 0.0012150873 0.0080868133 0.0018459329 0.0011393603 0.0063316747 -0.0037352532 -0.0057670850 -0.0028674781 0.0104834871 -0.0115247930 0.0023243104 -0.0038576176 0.0015387333 -0.0008049073 0.0128493186 -0.0052994279 0.0041646028 0.0007643929 0.0053272729 0.0022664563 0.0011871267 0.0058320862 0.0047470794 -0.0000462095 0.0031589050 -0.0054848492 0.0021796986 -0.0021512549 -0.0039458395 0.0018786394 0.0003596115 0.0046917659 -0.0010761419 -0.0013446130 0.0002443292 -0.0000891451 0.0008522172 0.0006828545 0.0013075336 -0.0047085280 -0.0012180273 0.0019700660 -0.0011175062 -0.0007350717 0.0023017098 -0.0052452210 -0.0048662390 0.0037236548 0.0016440523 -0.0028466522 0.0020883408 0.0025797326 -0.0008486652 0.0012769322 0.0008839486 -0.0010863213 0.0046981404 0.0022390608 0.0001702727 0.0021826872 -0.0004367595 -0.0007329948 -0.0042273538 -0.0040080669 0.0027706232 0.0007690051 0.0025633798 -0.0033111522 0.0035088192 -0.0091334581 0.0016475154 0.0013422064 -0.0010322612 0.0028738070 0.0135806464 -0.0106548950 -0.0021182633 0.0051852747 0.0038985350 0.0040144652 0.0042160868 0.0060447475 0.0021196118 0.0044410997 0.0016565925 -0.0003236914 0.0018025012 0.0065543133 0.0139928672 0.0030913664 -0.0026612307 0.0070073997 0.0000719617 0.0096179538 0.0085901845 0.0233955254 -0.0209270069 0.0113116611 -0.0066981900 -0.0471289011 -0.0449550424 0.0410897535 0.0118751075 0.0604202936 -0.0059312773 -0.0001891207 -0.0008442890 0.0413209991 -0.0033158598 -0.0139072602 0.0021546928 -0.0130886002 0.0020232988 -0.0177038829 -0.0245357029 0.0176633885 -0.0668393002 0.0306650583 -0.0397421241 -0.0034972132 0.0429064784 0.1762805661 -0.0267624717 0.0511068054 0.0428086823 -0.0634468071 0.0105772042 -0.1269823323 0.0762277294 -0.0546963047 0.0964813653 0.0945578857 0.0341755417 -0.1251155597 -0.0794910343 0.0114590894 0.1448187676 -0.0297581301 -0.0284594303 -0.0428744259 -0.0741474777 -0.0062870422 0.0573229408 0.0205130672 -0.0220763726 -0.2100067154 0.0543667160 0.0290613417 0.0296512082 0.0649691587 -0.0678715366 -0.0050959444 -0.0379104862 0.0095148894 -0.0125844137 -0.0118100550 0.0283278298 0.0149901705 -0.0169824781 -0.0225448790 -0.0163673771 0.0110046392 -0.0822756965 0.0605049075 0.0125182930 -0.0084003701 0.0061426080 -0.0015096572 0.0012866486 -0.0005107646 0.0007307371 -0.0003911595 0.0000870918 -0.0027887060 0.0026632521 -0.0007388428 -0.0001236707 -0.0019568936 -0.0006536713 0.0027514026 -0.0032204123 0.0013337118 0.0016483100 -0.0005257203 0.0002043007 0.0159212106 -0.0147393787 0.0101839261 -0.0056933288 0.0027171189 -0.0051190643 -0.0166895090 0.0115496553 -0.0093968469 -0.0029181052 0.0109492812 -0.0045022034 0.0098609928 0.0008944833 0.0117009453 -0.0022913160 0.0295853436 -0.0020522063 -0.0035725201 0.0076622734 -0.0010395413 0.0015007413 -0.0011985965 0.0038980925 0.0030004499 0.0035806157 -0.0020425122 -0.0011542282 -0.0083516430 -0.0004898408 -0.0050906679 -0.0061189543 -0.0038266244 0.0022873957 0.0041699200 -0.0036238451 0.0189631837 -0.0176360824 0.0038365115 -0.0178653389 0.0060962166 -0.0084131823 -0.0168364753 0.0141579237 -0.0148191174 0.0046825126 -0.0074913765 -0.0080827447 -0.0002261991 0.0085012085 0.0012211480 -0.0014490040 0.0039216264 0.0017288703 0.0696948810 -0.0705514577 0.0039271015 0.0033867713 0.0106532441 -0.0043430044 0.0034463110 -0.0037399454 -0.0019972643 0.0023443463 -0.0019021674 -0.0084271420 -0.0036222060 -0.0043641451 0.0014321650 -0.0003965895 -0.0031965166 -0.0051228585 0.0009496223 0.0050356171 0.0051227254 0.0002484478 0.0056741227 0.0030744113 0.0029497512 0.0051256986 0.0035035855 0.0024192338 0.0023354361 0.0014820831 -0.0013269281 0.0010364280 0.0024317553 -0.0016271072 -0.0184117302 0.0131791897 -0.0028337859 0.0061601863 -0.0258298311 0.0023284070 -0.0185442512 0.0152509365 -0.0203227270 -0.0089307407 -0.0099949122 0.0034174673 -0.0078802705 -0.0013182673 0.0301728612 -0.0039018704 0.0055509494 -0.0242843296 0.0088439205 0.0147554110 0.0095719868 -0.0139285931 -0.0132589726 -0.0090919655 -0.0050757160 -0.0026085806 -0.0059763941 -0.0001476760 0.0039595465 -0.0068687345 -0.0000230325 0.0053955745 0.0015901443 -0.0029240417 -0.0051041695 0.0043039010 -0.0161739642 0.0088586450 0.0110129592 0.0033353929 0.0092477467 0.0188131948 0.0058141547 0.0201818023 -0.0325210023 0.0347943155 -0.0171223395 0.0191799145 -0.0211877004 -0.0129171473 0.0129934769 -0.0143879599 -0.0078501003 -0.0393461240 0.1046158931 -0.0433293460 0.0324603288 0.0197820356 -0.0041642493 -0.0047039353 -0.0468151089 0.0116396374 0.0240889116 0.0559178868 -0.0386135674 -0.0588594149 0.1256422608 -0.0870118906 0.0144580907 -0.0023795406 -0.0136995606 0.0205994928 -0.0086247253 -0.0233623008 -0.0401117145 -0.0259424233 0.0153231960 0.0203415571 0.0140450000 0.0154050652 0.0151741369 0.0108918417 0.0066290108 -0.0789825150 -0.1204502448 0.0429243018 0.0194913125 -0.0542211112 0.0168687268 0.0069609080 0.0462576414 -0.0140297610 0.0080715879 -0.0544451008 0.0304308416 -0.0832348501 -0.1075163978 0.0688907016 0.0048099224 0.0156362594 0.0160855959 0.0025266230 0.0106532410 -0.0202316157 -0.0003580957 -0.0181372908 -0.0153650514 0.0009264586 -0.0097181948 0.0214131533 -0.0377549051 0.0078500067 -0.0463495485 0.0580122535 -0.0050001850 0.0935534657 0.0017053495 -0.0137822194 -0.0295717121 -0.0064000409 -0.0126653531 -0.0663083968 0.1793291359 -0.0508334183 0.2941811494 0.1371893662 -0.0107292092 0.1392570930 -0.0047080259 0.0059487500 0.0048345269 0.0122145281 -0.0021973278 0.0459145093 -0.1760730424 0.0321263773 -0.2581685057 -0.0452253789 0.0318957830 -0.0335490822 0.0676540508 -0.0138293647 -0.1186569886 -0.0468735514 0.0012684696 0.0656696292 -0.0065602130 -0.0077549570 0.0023779260 0.0208701945 -0.0026463398 -0.0536156089 -0.2000504087 0.0172278061 0.2904752495 -0.0545142683 -0.0095743874 0.0540827797 0.0057262584 0.0117212842 0.0271655972 -0.0077572151 0.0153229179 0.0710880769 0.1977718587 -0.0026200021 -0.3330827515 0.1247011496 -0.0212840921 -0.1389579067 0.0037372383 0.0009288484 0.0037328643 -0.0015815303 0.0088400795 0.0047263615 0.0040432084 0.0126066173 0.0153712340 -0.0058898368 0.0011831939 -0.0095606999 -0.0041854856 -0.0041022547 -0.0003756001 -0.0142588249 0.0040956302 0.0094905457 -0.0166585344 -0.0044092614 0.0066118566 0.0057475056 0.0063087856 -0.0034748330 -0.0580542535 -0.0167651641 -0.0929689635 0.0718698086 -0.0927546694 0.1443597733 0.0010296381 -0.0713696504 0.0185864496 -0.0915536485 0.0360059668 -0.0947615819 0.0292577299 -0.0251344902 0.1843023747 -0.0087340011 -0.0107219728 0.1511970405 0.0799961735 0.0073138078 -0.0620600101 -0.0337344989 -0.0697727122 0.0026175691 0.0279959180 -0.0286106035 -0.0828041030 -0.1085695462 -0.0723340690 0.1128859758 0.1304154271 0.0711019368 -0.1112990051 -0.0892880161 0.0934620864 -0.1296634989 -0.0138240296 -0.0624210940 0.0953197658 -0.0092284890 0.0150710846 0.0041119944 0.0095059019 0.0034754135 0.0017538448 -0.0167246432 0.1267338885 -0.0991249876 -0.0132903133 0.0013172799 -0.0029661923 0.0002575713 -0.0026443607 -0.0001375612 -0.0030073299 0.0021966108 0.0000921531 0.0039461678 -0.0027361518 -0.0046644193 -0.0015698242 0.0012162105 0.0007323061 -0.0019736641 0.0006329890 0.0003201224 0.0009415164 0.0006977248 -0.0009457601 -0.0124208944 0.0066970335 -0.0162251370 0.0045360230 -0.0039689042 0.0058030722 0.0100760254 -0.0121833614 0.0057454272 0.0053994336 -0.0120078678 0.0091153197 -0.0074408812 0.0015997344 -0.0035457324 0.0115093357 -0.0481860153 0.0297267422 0.0039752837 -0.0049124199 0.0016879409 -0.0030743256 0.0028019041 -0.0044113747 -0.0021204755 0.0053282338 -0.0003255097 0.0044250745 -0.0050338943 0.0024079910 0.0035142789 -0.0005854122 0.0007716528 -0.0052206841 0.0036695370 -0.0000173341 0.0168433230 -0.0196222267 0.0044281922 -0.0243296149 0.0301697247 -0.0087530079 -0.0052395994 0.0089355541 0.0034569781 0.0282629882 -0.0407759741 0.0120659331 0.0155110320 -0.0238785941 0.0019344501 0.0037062287 -0.0020678133 0.0046074835 -0.0873203363 0.0962911463 -0.0057155808 -0.0037860337 -0.0093503845 0.0007021133 -0.0058649084 0.0063127586 0.0031798191 -0.0036862183 0.0039046604 0.0158333392 0.0048132727 0.0060727183 -0.0021790186 0.0055448548 0.0110861691 -0.0013153127 -0.0104533668 -0.0141983033 -0.0028652271 -0.0002632365 -0.0214807393 0.0042579776 -0.0099693864 -0.0129620451 -0.0003776505 -0.0031620374 -0.0030671941 -0.0027060858 0.0022760845 -0.0017753952 -0.0037651483 0.0183067579 0.0249779744 0.0116629641 0.0203512990 -0.0182201309 0.0652613772 -0.0008517745 0.0421461562 -0.0523608793 0.0453699029 0.0415164289 0.0029099620 0.0403003087 0.0333364156 0.0220492721 -0.0904188066 0.0081647135 -0.0424987505 0.0522886853 -0.0174832139 -0.0406647970 -0.0201399598 0.0391420457 0.0244574611 -0.0040127653 0.0297714421 0.0240972413 0.0101536027 0.0002258178 -0.0056291493 0.0111550595 0.0003524211 -0.0086457816 -0.0018213804 0.0038782087 0.0077291470 0.0001095373 -0.0100150450 0.0034697199 0.0198618463 -0.0054322842 0.0208574875 0.0278369538 0.0010195377 0.0208686706 -0.0184856232 0.0111239657 -0.0086412884 -0.0005000433 -0.0008535680 -0.0171032892 -0.0019642794 0.0092485815 -0.0071764381 -0.0521544369 0.1637033776 -0.0619297959 0.0120109459 0.1035183825 -0.0580357554 -0.0104233709 -0.0174630474 0.0066198155 0.0400261152 -0.0674585876 0.0247720851 0.0021560988 -0.0303388859 0.0302735484 -0.0259168497 -0.0145174359 0.0187008542 -0.0296447993 -0.0123895183 0.0211799344 0.0043001665 -0.0038395296 -0.0025748836 0.0182708772 0.0226370313 -0.0182276290 0.0232125531 0.0316474162 -0.0106600263 0.1284112591 0.1959918615 -0.0773866689 0.0903841760 0.1811221774 -0.0888283636 0.0108586720 -0.0053148343 0.0021411210 -0.1277373253 -0.1838261891 0.0833129876 -0.1216649660 -0.1802784625 0.1159034486 0.0052770386 0.0072711608 0.0141721522 0.0038263967 0.0037315899 -0.0148256743 -0.0024285328 0.0041373780 0.0102564262 -0.0036822412 0.0007088162 -0.0091235654 -0.0328970563 0.0057050908 -0.0445612542 0.0380356430 0.0262653196 0.0903454439 -0.0034647818 -0.0152899314 -0.0271768450 -0.0158794834 -0.0202938020 -0.0488156436 0.1461539233 -0.0460729476 0.2589365668 0.0927766495 -0.0310471611 0.1248060476 0.0362126704 0.0465168036 -0.0083879933 0.0275822019 -0.0062907879 0.0313760132 -0.0825237709 0.0650024767 -0.2663365888 -0.0227841126 -0.0365639184 -0.0818720005 -0.0178156238 0.0271958269 0.0728865178 0.0236263058 -0.0029526548 -0.0371386902 -0.0181152576 0.0476668193 -0.0125600090 -0.0277249074 0.0044616296 0.0190689838 0.0554266992 0.0400097964 -0.1916007617 -0.0103977886 -0.0400639907 -0.0676076749 0.0007105156 -0.0119518569 -0.0162979850 0.0128410877 -0.0171861113 -0.0304241830 -0.1021739061 -0.0041116867 0.1812849345 -0.0523998603 -0.0129834752 0.0858068587 -0.0066173650 -0.0017212098 -0.0073686856 0.0017110201 -0.0138595179 -0.0084656176 -0.0070476826 -0.0207510636 -0.0264500523 0.0081377538 -0.0026239690 0.0134948964 0.0079380597 0.0066164983 0.0007430946 0.0262183364 -0.0037117404 -0.0130004384 0.0251882874 0.0089237372 -0.0097776337 -0.0091344189 -0.0094840872 0.0015648624 -0.0057536519 -0.0011687897 -0.0119300197 0.0047933341 -0.0108295138 0.0127876390 0.0005418182 -0.0093887143 0.0030416269 -0.0115002842 0.0062791924 -0.0165848016 0.0065127590 -0.0020862700 0.0226984121 0.0022822318 -0.0065402734 0.0117656420 0.0087460136 0.0004161553 0.0011641659 0.0012106295 -0.0122331353 -0.0001005299 0.0047128207 -0.0065379127 -0.0034856915 -0.0078190109 -0.0119988140 -0.0001940785 0.0148918583 0.0099031909 -0.0123983763 -0.0106811825 0.0105095064 -0.0143999653 -0.0020723094 -0.0080814469 0.0107028709 -0.0019361244 0.0024804738 0.0010605341 0.0019685399 -0.0015110572 -0.0000795327 -0.0106536354 0.0836503424 -0.0602371779 -0.0134790436 0.0065562933 -0.0050785180 0.0009522837 -0.0018672659 0.0008432179 -0.0017359033 0.0014490204 0.0007068320 0.0045108184 -0.0024054672 -0.0030985104 -0.0021112691 -0.0007754709 -0.0000674353 -0.0034736952 0.0005893651 -0.0004821824 0.0004029718 0.0012389602 -0.0014733708 -0.0143045836 0.0092925947 -0.0160072292 0.0035303479 -0.0054995563 0.0018653306 0.0117776361 -0.0130684345 0.0073984303 0.0048333203 -0.0062370546 0.0069197226 -0.0056615651 0.0000032992 -0.0031978349 0.0098122406 -0.0385170511 0.0200166097 0.0021305615 -0.0031237652 0.0010303954 -0.0012133636 0.0009508050 -0.0026706609 0.0000074746 0.0004331044 0.0003895391 0.0009911754 0.0001667070 0.0009548072 0.0014195059 0.0016696769 0.0004980273 -0.0011475804 -0.0005179202 0.0005081340 -0.0033551616 0.0055716000 -0.0020167846 -0.0029189170 0.0053774716 0.0000119909 0.0041155668 -0.0041657054 0.0050128851 0.0036218054 -0.0050315114 0.0033097244 0.0041095486 -0.0084562265 -0.0003716773 0.0029712239 -0.0009182303 0.0031913257 -0.0619305547 0.0618887861 -0.0013638639 0.0075783179 0.0029382006 0.0028727071 -0.0049634075 0.0025537840 0.0094309825 -0.0055656144 0.0087351681 0.0182884487 0.0100184298 0.0143054907 0.0012393302 0.0019866604 0.0130022918 0.0009188206 -0.0049411612 -0.0189818049 -0.0066571699 0.0022820140 -0.0204256676 0.0017374393 -0.0082170880 -0.0189431007 0.0009589092 -0.0085621196 -0.0087939726 -0.0048392910 0.0017676466 -0.0026921818 -0.0045689877 0.0102135628 0.0444337883 -0.0187320055 0.0122902423 -0.0231111930 0.0875712956 -0.0073692695 0.0479753423 -0.0367348926 0.0463792185 0.0320168489 0.0092397571 0.0282470817 0.0336917345 0.0192735481 -0.0888048920 0.0083223257 -0.0360914795 0.0657227337 -0.0217426486 -0.0588242563 -0.0134715759 0.0429718745 0.0143740574 -0.0161120516 0.0410465377 0.0345148898 0.0164564461 0.0012098156 -0.0079892705 0.0177810796 0.0014219475 -0.0131389966 -0.0079401604 0.0102787045 0.0190782712 0.0002271510 -0.0013074336 0.0001225110 0.0031957092 -0.0048583411 0.0053091707 0.0035855416 -0.0032109470 0.0042508764 -0.0014664368 0.0019283643 -0.0017071812 -0.0020416515 0.0032068536 -0.0035830840 -0.0022832835 0.0035438939 -0.0023782017 -0.0207959738 0.0452590945 -0.0205615937 -0.0092896794 0.0340323437 -0.0182419616 0.0009347633 -0.0022897818 0.0003396872 0.0120337317 -0.0305444169 0.0147733850 0.0083515547 -0.0228847098 0.0148352298 0.0353495457 0.0496028183 -0.0246040936 0.0302677905 0.0561281890 -0.0265553548 0.0081950830 0.0045875313 0.0001085135 -0.0425542020 -0.0558481717 0.0253934654 -0.0452991966 -0.0489887581 0.0268582877 -0.2658728334 -0.3299717330 0.1620378420 -0.2652980262 -0.3352774033 0.1678562447 0.0017618257 -0.0108029288 0.0024542356 0.2533459011 0.3637480049 -0.1806597772 0.2669111046 0.3632141929 -0.1996889288 -0.0004073338 0.0005789508 -0.0000144377 0.0004640723 0.0009475608 0.0001905022 -0.0007603833 0.0050024815 0.0055310036 0.0012184556 0.0002481659 -0.0075510313 -0.0039568115 0.0006932756 -0.0051716402 0.0052323438 0.0030206725 0.0113252809 -0.0011976052 -0.0011022567 -0.0046032379 -0.0024171838 -0.0024341544 -0.0072443025 0.0223532114 -0.0058711701 0.0411290468 0.0150131333 -0.0043430730 0.0210242419 0.0042409643 0.0050914215 0.0004020751 0.0032696557 -0.0010714350 0.0053079995 -0.0172678983 0.0084308430 -0.0408907832 -0.0068171025 -0.0033221723 -0.0144641983 0.0029673185 0.0066184274 0.0037946804 0.0021288109 -0.0012938448 0.0007002928 -0.0026556997 0.0118011281 -0.0021868875 -0.0002643063 -0.0010570031 0.0005478459 -0.0112429367 0.0131402276 -0.0112734519 -0.0029376474 -0.0067112204 -0.0033205640 -0.0032996638 -0.0026926201 -0.0025429670 -0.0046223621 -0.0039893739 -0.0029560855 -0.0058506953 -0.0028481990 0.0021665984 -0.0078822495 0.0004216799 -0.0016995285 -0.0112216381 -0.0074547055 -0.0127962880 -0.0079218201 -0.0201705022 -0.0274142595 -0.0041425735 -0.0165134991 -0.0256232847 0.0037798430 -0.0041619592 0.0028494929 0.0143143487 0.0092047380 0.0001497715 0.0203756736 -0.0014977113 -0.0111648805 0.0351256336 0.0171536211 -0.0152310755 0.0000566369 -0.0022219478 -0.0032098299 0.0224422363 0.0059966147 -0.0049971134 0.0126403376 0.0094768495 -0.0231005707 0.0186035669 0.0069355822 -0.0065556133 0.0080818249 -0.0023091161 -0.0041512004 0.0077859050 0.0115820348 -0.0092761110 0.0059868388 0.0000265546 -0.0361369101 -0.0242787312 -0.0019078669 0.0245495950 0.0088211915 0.0181505747 -0.0018698152 -0.0018112019 0.0008844874 0.0187681484 0.0167622739 0.0185666612 -0.0117779951 -0.0262730141 -0.0160377590 0.0261470370 0.0023906273 -0.0050824953 0.0129178885 0.0046564459 0.0087911252 -0.0173559632 0.0026367162 -0.0059610046 0.0003916824 0.0047168968 -0.0046175980 0.0045429229 -0.0239607408 0.2018578471 -0.1324298082 -0.0477755598 0.0313646117 -0.0230320439 0.0050701525 -0.0064293199 0.0033015217 -0.0048174759 0.0042439996 0.0038863412 0.0160234611 -0.0091142420 -0.0061804497 -0.0082072722 -0.0029577474 -0.0021901024 -0.0159847866 0.0026027275 -0.0022073476 -0.0004876683 0.0036983089 -0.0046882905 -0.0603417137 0.0446000849 -0.0563602793 0.0201340143 -0.0264645814 0.0054678218 0.0495258746 -0.0549961559 0.0320650907 0.0163614015 -0.0106707247 0.0182499024 -0.0186216700 -0.0072697163 -0.0111865674 0.0308046635 -0.1239783596 0.0509660159 0.0036957498 -0.0066193768 0.0011420454 -0.0025201540 0.0006856635 -0.0079901437 0.0008964612 -0.0012357404 0.0022240238 0.0035937807 0.0042855724 0.0024789973 0.0052149486 0.0079316353 0.0029554867 -0.0028775573 -0.0043515056 0.0028836700 -0.0183584291 0.0265128073 -0.0080182625 0.0070862796 0.0040850532 0.0071816583 0.0159895933 -0.0148947567 0.0203215976 -0.0041011912 0.0048754221 0.0070157572 0.0034713627 -0.0158125135 -0.0037581856 0.0109158000 -0.0014958510 0.0066163451 -0.1941177931 0.1727054609 0.0016703342 -0.0011667302 -0.0052359177 0.0014147149 -0.0153025437 0.0060954442 0.0365112012 -0.0191030102 0.0333098642 0.0655818647 0.0366362920 0.0524148780 0.0050596254 0.0143137396 0.0426284298 0.0126384511 -0.0262798839 -0.0594747304 -0.0239883951 0.0048002184 -0.0825615855 -0.0044101699 -0.0395120829 -0.0603042886 -0.0114841507 -0.0315183883 -0.0322811048 -0.0176167849 0.0050256430 -0.0096038905 -0.0154410779 0.0464657007 0.1351439281 -0.0315751512 0.0539579398 -0.0736590961 0.2746020601 -0.0158977064 0.1718146734 -0.1681242596 0.2173149096 0.1443434823 0.0633429299 0.0743496752 0.1284871275 0.0638477761 -0.3675839492 0.0377046173 -0.1310400195 0.2436055888 -0.0848038602 -0.1817352048 -0.0890012872 0.1659366385 0.1114649734 0.0078341915 0.1142120677 0.0888056849 0.0592377163 0.0047733500 -0.0279174553 0.0637134380 0.0056322792 -0.0467863090 -0.0304096837 0.0376165658 0.0715928163 0.0051263758 0.0015904134 -0.0023368255 -0.0054380779 -0.0086860913 0.0037452521 -0.0091659367 -0.0113381004 -0.0029126619 0.0100396974 0.0001041187 -0.0015971216 -0.0112490817 0.0095121056 0.0062029366 -0.0093130158 0.0052730780 0.0013362034 -0.0268461911 0.0249078592 -0.0164081951 -0.0344929648 0.0247092053 -0.0134756822 0.0157209062 0.0053605648 -0.0043690414 -0.0055202195 -0.0513934757 0.0305249622 0.0126043431 -0.0445449982 0.0323148081 -0.0104093523 -0.0140390055 0.0025079406 -0.0062032649 -0.0127699245 0.0055188587 -0.0072596444 -0.0080244611 0.0039261266 0.0128736448 0.0225556840 -0.0104608680 0.0139418658 0.0211065240 -0.0093228376 0.0615634625 0.0801838919 -0.0425745536 0.0733814227 0.0867776581 -0.0418700647 0.0078238694 0.0032150512 -0.0027495706 -0.0940303903 -0.1294760346 0.0639921425 -0.1103068876 -0.1334144439 0.0715723594 -0.0078419101 -0.0042158287 -0.0144593008 -0.0010776073 0.0015365869 0.0167326794 -0.0018183494 -0.0000270368 0.0028436914 -0.0006570847 -0.0008031421 -0.0022000152 0.0057119866 -0.0014844323 -0.0046162594 0.0001054636 -0.0150328867 -0.0038977282 -0.0084622046 0.0050159500 0.0054970313 -0.0145037725 0.0156619808 0.0093080761 -0.0026489747 0.0046072660 0.0046015584 -0.0249131222 0.0030306426 0.0149215788 -0.0090068209 -0.0227759198 0.0037205473 0.0078404139 0.0033950172 -0.0037278685 -0.0338092744 -0.0178608045 0.0120878105 0.0051791958 0.0065265485 -0.0049430919 0.0045281560 -0.0065683876 -0.0184620732 -0.0059815549 0.0015074134 0.0082006336 0.0051892344 -0.0101334920 0.0006112992 0.0085981951 -0.0012640372 -0.0071537833 -0.0285641014 -0.0061759929 0.0636450194 -0.0061313279 0.0100385913 0.0305437689 -0.0021156198 0.0024362318 0.0065754199 -0.0042505225 0.0042611310 0.0094193368 0.0350824025 -0.0004692286 -0.0623599616 0.0176764572 0.0038734996 -0.0308128908 -0.0402767752 -0.0283327561 -0.0466368038 -0.0317071355 -0.0717540809 -0.1029999975 -0.0140650346 -0.0555781355 -0.0879222563 0.0096895043 -0.0164519378 0.0037909696 0.0536028041 0.0332514681 -0.0018104187 0.0572562899 -0.0018299128 -0.0366588747 0.1208091199 0.0594355835 -0.0510351090 0.0067594246 -0.0046156853 -0.0140913752 0.0886058189 0.0095084547 -0.0475841550 0.1634021257 0.0187508924 -0.0558144417 0.1103064026 0.0273349847 -0.0539310629 0.0169883767 -0.0275510145 0.0188602738 0.0040332488 0.0435547576 0.0112187996 0.0176667471 0.0467422855 0.0249221868 -0.0173894339 -0.0252237951 0.0143505907 -0.1137661835 0.0737690069 -0.0627379269 -0.0947530528 0.0431347098 -0.0555284031 -0.1873480138 0.0838170458 -0.0545230376 0.0930196333 0.0439983577 -0.0366429367 -0.0609899141 0.0550509938 -0.0278063410 -0.0099845971 -0.0328728814 0.0427146677 -0.0010308684 0.0045385136 0.0045301849 -0.0047327333 -0.0030916846 -0.0014661886 -0.0021317097 0.0088314697 -0.0114420263 0.0032975530 -0.0029732736 0.0015836902 -0.0005292455 0.0002741963 -0.0007010542 0.0016242239 -0.0009354202 -0.0002631768 -0.0013776586 0.0005864060 0.0004228966 0.0012285694 0.0003332528 0.0006451372 0.0019870927 0.0004052100 -0.0001055041 -0.0006167242 0.0006061490 0.0000986605 0.0063745127 -0.0048847553 0.0054810159 -0.0039013502 0.0045117592 0.0001284282 -0.0014856414 0.0048131163 -0.0008881141 -0.0008255656 -0.0022432264 -0.0004997448 0.0013378323 0.0033374113 0.0002374601 -0.0011936119 0.0076834922 0.0001297682 0.0006387715 -0.0002636328 0.0001619936 0.0005498933 -0.0008274156 0.0000722467 -0.0014102497 0.0031712088 -0.0004675865 0.0013005766 -0.0036558026 0.0008178155 0.0005543020 -0.0028372382 -0.0003454993 -0.0015280820 0.0023110931 -0.0003068850 0.0142278307 -0.0186055552 0.0062088466 -0.0131718416 0.0150252290 -0.0043083915 -0.0111991588 0.0146914052 -0.0058313908 0.0084516588 -0.0131270374 0.0019396166 -0.0004912525 0.0040334748 -0.0011421709 -0.0010372381 -0.0005405552 0.0008861754 0.0127592337 -0.0068600890 -0.0016277290 -0.0402779608 -0.0022351529 0.0025744601 0.0012643450 0.0010980647 -0.0076003758 0.0023983119 -0.0071557078 -0.0103073510 -0.0070718573 -0.0101512210 -0.0021196029 -0.0007577903 -0.0095771584 0.0001114122 0.0032726334 0.0131630831 0.0034702252 -0.0016889405 0.0162205040 -0.0013738835 0.0053359074 0.0130038685 -0.0008313709 0.0067198354 0.0066988643 0.0032879644 -0.0001649737 0.0017100941 0.0021725478 -0.0074568656 -0.0304575540 0.0111387895 -0.0101001536 0.0160111784 -0.0588902548 0.0039079210 -0.0307158469 0.0250912273 -0.0398365187 -0.0278721905 -0.0097276119 -0.0244251589 -0.0245607187 -0.0146700434 0.0690734410 -0.0070161184 0.0261505666 -0.0440064932 0.0146010895 0.0403627695 0.0081416195 -0.0284607687 -0.0080775581 0.0115057292 -0.0276715003 -0.0234920381 -0.0101573760 -0.0010998488 0.0037492808 -0.0109017668 -0.0016677270 0.0077604846 0.0070597688 -0.0077459397 -0.0147478675 0.0290247137 -0.0054219622 -0.0023378185 -0.0230217376 -0.0137167188 -0.0060023529 -0.0381179204 -0.0355616278 -0.0281049134 0.0555989545 -0.0388069323 0.0151220318 -0.0563826286 0.0532356595 0.0296516864 -0.0434488823 0.0438082062 0.0091462584 -0.0156194035 -0.0287631439 -0.0008100814 -0.1114709420 0.0298539516 -0.0242341586 0.0339952309 0.0635640812 -0.0210363375 -0.0164126696 -0.2623498112 0.1613329081 0.1007382360 -0.2726801054 0.2033266385 0.0461397415 0.0105707743 -0.0255011399 0.0488629863 -0.0215860019 -0.0525403631 -0.0692992272 -0.0216824929 0.0132406716 0.0537499620 0.0078969360 0.0554774744 0.0423202689 0.0151670618 0.0248949897 -0.1476446696 -0.2382466970 0.0918479239 -0.0090561513 -0.1997731336 0.0764769627 -0.0239493743 0.0757332486 -0.0236610186 0.0782193478 -0.1235832511 0.0592557438 -0.0471481162 -0.1259977367 0.1168721082 -0.0194270650 -0.0254164724 -0.0459098495 -0.0036587758 -0.0092493965 0.0551728196 0.0112537450 -0.0375002985 -0.0526818676 0.0085163291 -0.0064427508 0.0649987042 0.0384726223 -0.0051342830 -0.0212706695 -0.0170920528 -0.0739124695 -0.0223079199 -0.0442509712 0.0150902704 0.0344531935 -0.0816937720 0.0827657809 0.0659927658 -0.0504782085 0.0200784461 -0.0492111915 -0.1724308269 0.0063705687 0.0572236186 -0.0292933144 -0.1101647044 0.0069041728 0.0582317151 0.0242803818 -0.0425409238 -0.1126246850 -0.0908430004 0.1201980753 0.0756660212 0.0064761915 -0.0179451692 -0.0075690492 -0.0895939143 -0.0256149429 -0.0455586978 0.0057892512 -0.0243407988 -0.0131199990 -0.1346234551 0.0061174174 -0.0633002950 0.0551158472 -0.0505902964 0.1063007408 -0.1495002222 0.1164421915 -0.0878999253 0.0353272705 -0.0315446952 0.0569579008 -0.0074238859 0.0367029731 0.1294060116 0.0616309449 0.0773802720 0.0435462106 0.0000068431 -0.0388531061 0.1893593181 -0.0578663730 0.0877001185 0.0071346590 0.0064903938 0.0085043003 0.0089470743 0.0118048087 0.0224202333 0.0004703184 0.0048534927 0.0103632506 0.0012467389 0.0030055156 0.0054508072 -0.0100034871 -0.0053786160 0.0011252667 -0.0028601445 -0.0018131731 0.0032216299 -0.0181325066 -0.0105064386 0.0079346343 -0.0067015189 -0.0034862067 0.0039121194 -0.0199141776 0.0018912285 0.0055857314 -0.0231170982 0.0107920216 0.0393555243 -0.0183153384 0.0107058480 0.0084495210 0.0055143598 0.0020018513 -0.0044887112 0.0053818554 -0.0066749654 -0.0070881389 0.0009816316 -0.0017871235 -0.0104758733 -0.0016176346 0.0048138812 0.0040138650 0.0134327369 -0.0099239288 0.0064580919 0.0068208032 -0.0025534698 0.0095558386 0.0269538387 -0.0113296380 0.0020752007 -0.0150919825 -0.0074798224 0.0095585959 0.0220852759 -0.0231819113 0.0150862257 -0.0013595482 0.0114965665 -0.0137105920 -0.0012260027 0.0022883716 0.0022698913 -0.0029112184 -0.0053120955 -0.0027443628 -0.0048238430 0.0286663478 -0.0207417229 0.0169058205 -0.0030383503 0.0143243300 -0.0010459659 0.0069231132 0.0072753815 0.0010831660 0.0027096047 -0.0031937114 0.0001375662 0.0046451955 -0.0022408665 -0.0049752759 -0.0033447162 -0.0001954421 0.0093825553 -0.0033078672 -0.0027079495 0.0030460757 -0.0036386486 -0.0001698158 0.0112232020 -0.0118450352 0.0026391778 -0.0017907665 -0.0054578164 -0.0009944661 -0.0054520945 0.0136943860 -0.0090202130 -0.0002439572 -0.0020373094 0.0023087018 -0.0004082799 0.0041459676 0.0035431969 -0.0001186355 -0.0004033662 0.0108270162 0.0010629125 -0.0004141721 0.0010704227 -0.0004032833 0.0014970948 -0.0000238599 0.0081980272 -0.0075340270 0.0016072603 -0.0071087307 0.0037753285 -0.0008885146 -0.0077338553 0.0045414283 -0.0034746362 0.0064923127 -0.0047024664 -0.0005117110 -0.0350532478 0.0517024925 -0.0141738257 0.0272403706 -0.0436654474 0.0117691347 0.0320512088 -0.0504631902 0.0051982839 -0.0276737558 0.0402644299 -0.0131897994 0.0076793923 -0.0079495096 0.0020683393 -0.0045515826 -0.0045943498 0.0001232619 -0.0085615782 0.0037717501 -0.0015724498 0.0040551995 0.0016399620 -0.0009273002 0.0007394829 0.0013444843 -0.0060398440 0.0019212955 -0.0047944988 -0.0064514154 -0.0051459905 -0.0083053167 -0.0019793493 0.0001782125 -0.0049235467 0.0005110095 0.0010131467 0.0079439863 0.0023159411 -0.0007955193 0.0084924079 -0.0014553068 0.0022385725 0.0079591286 -0.0013439082 0.0049052084 0.0050147793 0.0024985667 -0.0002635853 0.0011960510 0.0013871248 -0.0027636622 -0.0184641472 0.0100505642 -0.0035385211 0.0095479027 -0.0359459534 0.0033928199 -0.0170952875 0.0103996651 -0.0187779617 -0.0152794482 -0.0018541918 -0.0147344450 -0.0145326475 -0.0089825406 0.0333357429 -0.0026128747 0.0149103206 -0.0244705097 0.0079630078 0.0246688161 0.0019628527 -0.0150718579 -0.0008576661 0.0109167402 -0.0178176540 -0.0155624112 -0.0076478106 -0.0008507238 0.0026855377 -0.0076859822 -0.0007058892 0.0054349990 0.0049355760 -0.0056502141 -0.0110099419 0.0027842699 -0.0146699151 0.0058685750 0.0280491716 -0.0517720422 0.0317865047 0.0212913874 -0.0350161253 0.0311676839 0.0073332838 -0.0290888329 0.0144269153 -0.0276695335 0.0682046070 -0.0502470191 -0.0295107809 0.0570456602 -0.0402533296 -0.1709687298 0.3658465039 -0.1847830968 -0.1341652284 0.3463478448 -0.1792148509 -0.0143318500 0.0261226782 -0.0034018650 0.1980081045 -0.4407462562 0.2337571762 0.2072145643 -0.4269839793 0.2331857664 -0.0055604963 -0.0037152902 0.0038138711 -0.0054908469 -0.0010557676 0.0062000819 0.0072973972 0.0037655609 -0.0020233743 -0.0042866842 0.0002141471 -0.0057825503 -0.0033710313 -0.0019176847 -0.0034612093 0.0274884552 0.0363626943 -0.0162477979 0.0135624457 0.0327224081 -0.0139435817 -0.0001118304 -0.0076098582 0.0025363433 -0.0126484006 0.0058354230 -0.0021639802 0.0014606172 0.0066788096 -0.0097461171 0.0074166897 -0.0049575089 0.0044650003 0.0032319337 -0.0074076224 -0.0055932067 -0.0004771378 0.0032296699 0.0035878220 -0.0004762033 0.0010472017 -0.0048434862 -0.0039048372 0.0018062096 0.0045833124 0.0047378201 0.0065445828 0.0014781763 0.0070697420 -0.0005057523 -0.0039639795 0.0136511773 -0.0108692950 -0.0095835089 0.0005729145 0.0003869548 -0.0019840260 0.0279202951 0.0020440066 -0.0093276634 -0.0013763302 0.0111459576 0.0001069908 -0.0126730589 -0.0031018029 0.0058070210 0.0138748684 0.0078477508 -0.0016417509 -0.0092772388 0.0063972817 0.0178328005 0.0021600166 0.0103826606 0.0001573738 0.0045884531 -0.0016140843 0.0038795234 0.0022450883 0.0148597480 -0.0013645492 0.0083810844 -0.0067499307 0.0042863153 -0.0201887772 0.0176678979 -0.0020260786 0.0072877387 -0.0038092918 0.0090391627 -0.0070667451 0.0011131024 -0.0025148492 -0.0154501376 -0.0062282848 -0.0068696267 0.0015266191 -0.0002978772 -0.0086887414 -0.0170954424 0.0070569761 -0.0173403470 0.0053011775 0.0054776467 0.0062351314 0.0080007794 0.0084284098 0.0181612085 -0.0008089809 0.0014386115 0.0052964126 0.0017983895 0.0020756802 0.0059953751 -0.0072268701 -0.0033016366 0.0000584461 0.0021799969 -0.0021956839 -0.0007664512 -0.0148878815 -0.0085158701 0.0070286430 -0.0061246299 -0.0046687831 0.0051015979 -0.0714727900 -0.0097477422 0.0831814573 -0.1331610801 0.0095248410 0.0707381128 -0.1073378582 0.0069263613 0.0339109950 0.0487407354 -0.0035435986 0.0565851807 -0.0130005936 -0.0403087708 -0.0926976926 0.0003239682 0.0358457408 0.0863908522 0.0505505590 -0.0027730884 -0.0589150839 -0.0821623242 0.0215006360 -0.0302163361 -0.0513776318 0.0291961663 -0.0717533049 -0.1228921106 0.0257628309 -0.0131701592 0.0787769425 0.0421802326 -0.0669403496 0.0746238653 -0.0742994464 0.0800781448 -0.0430544942 0.0053124570 -0.0085513391 -0.0191033953 0.0317765734 0.0221373397 -0.0233951534 -0.0194391848 -0.0232832421 0.0267011646 -0.2029116374 0.1523855947 0.0837265586 -0.0201405814 0.0551314634 -0.0073399682 0.0271178849 0.0224044663 0.0060360302 0.0058199110 -0.0107994545 -0.0069032280 0.0228026613 -0.0068672159 -0.0121357357 -0.0217467546 -0.0009301286 0.0300203381 -0.0093507672 -0.0118885515 0.0121530801 -0.0137100729 -0.0004909268 0.0827837503 -0.0763437369 0.0415773655 -0.0337212177 -0.0024352129 -0.0268613577 -0.0547278930 0.0859204768 -0.0503312929 -0.0093827011 0.0265458664 -0.0095234228 0.0226400547 0.0010220229 0.0451806772 -0.0097132551 0.0615909756 0.0372944554 -0.0102127627 0.0201939327 0.0032827079 0.0063317224 -0.0037348281 0.0152820049 0.0027141719 0.0140293162 -0.0104477325 -0.0049586248 -0.0259830352 -0.0016989380 -0.0151508536 -0.0258668382 -0.0107754475 0.0117190667 0.0167515478 -0.0190868612 0.0744739979 -0.0844024286 0.0199447680 -0.0655378866 0.0387692298 -0.0289591158 -0.0693002245 0.0676998360 -0.0608705938 0.0338625146 -0.0425107581 -0.0298302404 -0.0182987055 0.0402657743 0.0038681447 -0.0200977427 -0.0079321999 -0.0021810472 0.1333971641 -0.1570391470 0.0007844727 -0.0297852868 -0.0027063256 0.0012399939 -0.0001006235 -0.0099629807 0.0266714468 -0.0054208005 0.0223908584 0.0248144282 0.0209665301 0.0349200304 0.0115386957 0.0063548100 0.0218203957 -0.0107534059 -0.0138300143 -0.0328504586 -0.0026677206 0.0003241762 -0.0412432277 0.0132167910 -0.0142412224 -0.0324982838 0.0084443362 -0.0214453993 -0.0221077353 -0.0111677103 -0.0013780093 -0.0046216059 -0.0039900823 0.0275079226 0.0509198908 0.0064509904 0.0308241719 -0.0408640669 0.1452411458 -0.0068791463 0.0770242130 -0.0734258437 0.0719816095 0.0745310593 -0.0065161604 0.0997708445 0.0687402349 0.0491317902 -0.1643581594 0.0124799005 -0.0857520575 0.1001991707 -0.0323984970 -0.1009869239 -0.0162021468 0.0720034751 0.0127064555 -0.0507135560 0.0816390211 0.0718371325 0.0301313254 0.0041867785 -0.0086106357 0.0310876246 0.0052908839 -0.0212578514 -0.0238303896 0.0247028200 0.0490147153 -0.0272419925 -0.0037091435 0.0080908841 0.0268721582 -0.0021091001 -0.0002612006 0.0352961452 0.0197666475 0.0263746738 -0.0375521334 0.0049500288 0.0039011706 0.0395734473 -0.0121794860 -0.0430991244 0.0274260089 -0.0060336547 -0.0228968187 -0.0034455482 0.0804178096 -0.0374337830 0.0496730813 0.0636876082 -0.0259369433 -0.0510736078 -0.0284209104 0.0157484690 0.1009095365 0.0509621970 -0.0381915842 0.0280390371 0.0322926879 -0.0666552324 0.0242977191 0.0015797047 -0.0099041492 0.0266149157 -0.0165178038 -0.0297008274 -0.0392288608 -0.0045474623 0.0026499627 0.0378198230 0.0042612860 0.0358710414 0.0285742885 0.0087965672 0.0175310946 -0.0512004076 -0.0992814034 0.0354655961 0.0123936836 -0.0979847321 0.0357430722 -0.0241530067 0.0381687912 -0.0132457519 0.0493715628 -0.0996690750 0.0426733569 -0.0175809250 -0.0758806315 0.0772313323 0.0266840409 0.0172053640 0.0502702458 0.0034853304 -0.0020916045 -0.0602934971 0.0104522172 -0.0221099805 -0.0369427318 0.0074076090 0.0008198075 0.0448321376 -0.0256667697 0.0106645796 0.0320956048 0.0048623522 0.0556746574 -0.0155788390 0.0555196796 0.0015690759 -0.0024197534 0.0945051793 -0.0747835886 -0.0319961490 -0.0833013795 0.0268585922 -0.1691553081 0.0894190547 0.0104251943 -0.1757718746 0.0038444531 0.0906316696 -0.0178371817 -0.0842274841 -0.0215455154 0.0169073272 0.2261313779 0.0484737259 0.1086585556 -0.0209455281 0.0044569641 0.1432293216 -0.0147662481 -0.0436299792 0.0227980446 -0.0207459633 -0.0045145099 -0.0296083171 -0.0201692953 -0.0720734450 0.0085295824 -0.0647592520 0.0421678780 -0.0136707726 0.1673896560 -0.0943420618 -0.0941562517 -0.0273911003 0.0050047910 -0.1158604509 0.0415606538 -0.0213620545 0.0014361108 0.0964618974 0.0339200190 0.0254830134 -0.0802712997 -0.0078317096 0.1421787085 0.0674777859 -0.0333936540 0.1479886210 -0.0230823158 -0.0265255690 -0.0277646755 -0.0451427960 -0.0311392068 -0.0907813053 0.0109606910 0.0115421610 -0.0070547992 -0.0169371523 -0.0066066609 -0.0465924198 0.0313106250 0.0130552265 -0.0029139171 -0.0183800672 0.0148791521 0.0084165782 0.0472698309 0.0343075188 -0.0221980235 0.0393561293 0.0291973827 -0.0230915079 0.0058550879 0.0013433329 -0.0029972563 -0.0005538405 -0.0062619261 0.0011349180 0.0012575371 -0.0064825851 -0.0016100722 -0.0007114668 0.0048352916 0.0007616192 0.0002713496 0.0063214000 0.0019044326 -0.0050799790 -0.0029017595 -0.0018904534 -0.0044107566 0.0013603090 -0.0014359449 0.0067912628 0.0094770298 -0.0014914963 0.0077309418 -0.0036112618 0.0006722993 -0.0085489671 0.0091280740 0.0255404329 -0.0081859063 -0.0052468338 0.0064458220 -0.0043557394 0.0039254720 -0.0031845053 0.0034926293 0.0015827027 -0.0011823875 0.0023833744 -0.0045697701 -0.0024877943 0.0015861163 0.0025468095 0.0022622910 0.0059482884 -0.0357515055 0.0219120231 -0.0062712869 -0.0048913570 -0.0059934156 0.0002726387 -0.0048639234 -0.0059876131 -0.0016713168 -0.0014320450 0.0017986264 -0.0021964478 -0.0027107286 0.0022062802 0.0037773200 0.0055935780 0.0001202062 -0.0038188488 0.0001035280 0.0044136760 -0.0010807518 0.0010796051 0.0017228151 -0.0055024974 0.0065011765 0.0019367326 0.0055614665 0.0038265492 0.0045043833 -0.0016659929 -0.0094500359 0.0033780842 -0.0004595338 0.0022583765 -0.0049325929 -0.0002889232 -0.0056874949 -0.0000840175 0.0022389758 -0.0106912811 0.0008195314 -0.0026100884 0.0037402736 -0.0007507128 -0.0007282941 0.0013468618 -0.0025748766 0.0114370294 -0.0167096089 0.0049774604 -0.0067129620 0.0109384468 -0.0011642470 -0.0110715059 0.0179002986 -0.0032209893 0.0084984339 -0.0118792040 0.0030942016 -0.0692359456 0.0942883117 -0.0255452292 0.0635254609 -0.0838815172 0.0237443246 0.0719038071 -0.1044557153 0.0304766538 -0.0585523820 0.0861244936 -0.0160038474 0.0117244799 -0.0185522654 0.0020157087 0.0037583232 0.0032690469 -0.0009258644 -0.0019020971 0.0047610357 0.0012622821 -0.0033749729 -0.0128816459 0.0065723447 0.0023464324 -0.0039751896 0.0000606336 -0.0032928680 0.0052575338 -0.0025727566 -0.0090017981 -0.0106631661 0.0099645960 0.0622439847 0.0032460352 -0.0973333303 -0.0781912973 -0.0070004223 0.0570948389 -0.0656217496 -0.0060411208 0.1091223846 -0.0109669575 0.0065977424 0.0639228882 0.0058534476 0.0024906991 -0.0000728928 -0.0019271902 0.0007573417 0.0017423148 0.1279710167 -0.1740842881 0.3691854573 0.1358824787 -0.0210047338 0.0252602742 0.0526622926 0.0397342140 -0.2304052324 -0.3371431390 0.0191373699 -0.3346849026 0.5002026322 -0.0019272544 0.1106808922 0.0101749349 -0.0273519095 -0.2191099403 -0.0964239136 0.0457419861 0.0038054935 0.0391888620 0.0143504010 -0.0720526057 -0.1996414646 0.1131956768 0.1212239470 -0.0003946019 0.0009253838 0.0040810646 -0.0023705037 0.0053194788 0.0020643832 0.0038393784 -0.0067756938 -0.0078729802 0.0017137328 -0.0001385192 -0.0001558636 -0.0014965515 -0.0007642166 -0.0020508013 -0.0029006945 -0.0017869632 -0.0029744963 0.0022601390 0.0003322672 -0.0004827213 -0.0016636342 0.0005017760 0.0041578979 -0.0004357474 0.0006123244 0.0025445248 0.0014662044 -0.0064747805 0.0007626943 -0.0044099414 -0.0070220641 0.0029761025 0.0012998241 0.0002347439 -0.0002271575 -0.0090134353 0.0009782772 0.0008126510 -0.0015466051 0.0042886883 0.0003039932 0.0015179219 0.0063996535 -0.0105333807 0.0006701903 0.0057119655 -0.0029503431 -0.0024554347 -0.0060254899 0.0032264761 0.0003195079 0.0063013045 -0.0019616506 0.0017773536 0.0120105213 0.0006711350 -0.0361861809 -0.0300918792 0.0115056548 -0.0251334728 -0.0352663068 0.0202061444 0.0106141561 -0.0083541145 0.0014054485 -0.0269020600 -0.0341652586 0.0172356253 -0.0355600715 -0.0270382613 0.0182693969 -0.0010765950 -0.0001016562 -0.0017607991 -0.0002476866 0.0003284337 0.0019381153 -0.0028968080 0.0055130537 0.0100412616 -0.0010888269 0.0005362973 -0.0110570732 -0.0003457694 -0.0018005767 -0.0008477664 -0.0005011987 0.0010850502 0.0010560484 -0.0006946017 -0.0011222588 0.0009928030 -0.0018342090 0.0017099784 0.0015387088 -0.0004255866 -0.0012271396 -0.0035108692 -0.0042728165 0.0006308588 -0.0003121679 0.0006881553 -0.0000975623 -0.0011356018 0.0020348570 0.0001574761 -0.0014190963 0.0028523349 -0.0003651540 0.0008247277 0.0038482871 -0.0034856579 -0.0007292689 -0.0022579895 -0.0020387503 -0.0005171005 -0.0009372010 0.0004298985 0.0016926858 0.0023778924 -0.0039688675 -0.0002108858 0.0029839130 0.0000535870 -0.0016975921 -0.0034033647 -0.0033023860 0.0149886086 -0.0036953480 0.0056177695 0.0158659751 -0.0014112828 -0.0008968970 0.0009180881 -0.0010204327 0.0011634644 0.0004208363 0.0051835280 -0.0014983981 -0.0130880988 -0.0015136040 0.0041030101 -0.0015540726 0.0028172894 0.0026076341 0.0012725922 0.0053178339 0.0057674370 0.0137547259 -0.0053775640 -0.0038708281 -0.0014156476 -0.0035522622 -0.0037320749 0.0003117653 -0.0056411136 0.0048016289 -0.0024368568 0.0174443493 0.0004598949 -0.0130837223 -0.0020502080 -0.0198660135 0.0100409872 0.0051196086 0.0044765837 0.0162911517 0.0132981788 -0.0005614772 -0.0237024213 0.0746570567 0.0114387143 0.0036973134 0.0387423683 0.0190448992 -0.0181285453 -0.0188600515 -0.0065732549 -0.0057564740 -0.0072240188 0.0039063086 0.0307498036 -0.0075603378 0.0020542042 -0.0209394176 -0.0140322959 0.0085680932 0.0052225390 0.0168569612 -0.0266694904 0.0111788842 0.0049149794 -0.0022742816 0.0159494125 0.0453816005 -0.0281521539 -0.0178354266 -0.0106840413 -0.0081641198 0.0185316629 -0.0197263963 0.0203964823 -0.0325818155 0.0151560647 -0.0026763098 0.0075957100 0.0039485495 -0.0091040517 -0.0076959158 0.0009352781 0.0153162615 0.0114809514 0.0085955090 -0.1384597020 0.1344498563 0.2536455391 0.0214469197 0.1850644072 -0.0170778899 0.1170693772 0.1178599648 0.0321936244 0.0269257579 -0.0443708446 0.0024428989 0.0818118609 -0.0293250035 -0.0592499957 -0.1031378254 -0.0005106378 0.1116842228 -0.0114826410 -0.0799024446 0.0327224760 -0.0508304073 -0.0160233268 0.2396540122 -0.2264697905 0.0872709485 -0.1434751847 -0.0269507184 -0.1081240862 -0.0880894272 0.3010487205 -0.1450768921 -0.0246451920 0.0306718017 0.0190521659 0.0308832391 0.0405176320 0.1051284072 -0.0397218539 0.1460698617 0.1347171875 -0.0021506360 0.0116835733 0.0230089781 0.0097603248 0.0034899479 0.0419959319 0.0034608673 0.0282390461 -0.0294936863 -0.0304541663 -0.0429853755 -0.0119570938 -0.0452877871 -0.0666847932 -0.0307279197 0.0425023629 0.0365796689 -0.0526133295 0.1194689076 -0.1359447485 0.0320550093 -0.1050807806 0.0530390966 -0.0382103959 -0.1128017654 0.0825738511 -0.1553935777 0.0786049918 -0.0879782035 -0.0878226095 -0.0262811688 0.0684193210 0.0244424975 -0.0844638537 -0.0665158490 -0.0176473725 0.1981061196 -0.3023140901 -0.0171218418 0.0132290351 0.0088423969 -0.0045644294 0.0001017359 -0.0120391280 0.0288972708 -0.0037199877 0.0188117307 0.0172005945 0.0205012449 0.0373471250 0.0131233555 -0.0068966385 0.0007173556 -0.0174677542 0.0016823078 -0.0129570278 0.0050515723 0.0006172923 -0.0104091752 0.0167786279 0.0048306787 -0.0134143654 0.0158410653 -0.0196705130 -0.0204963163 -0.0100351744 -0.0008489796 -0.0041296257 -0.0036730103 0.0018984852 0.0143269526 -0.0060129379 0.0032579849 -0.0155190611 0.0528500133 -0.0046639512 0.0082275229 0.0085362706 -0.0036422141 0.0221361420 -0.0278456906 0.0871739539 0.0202411366 0.0276700386 -0.0238348435 -0.0014442386 -0.0341668989 0.0094126193 -0.0003203134 -0.0438976170 0.0299444616 0.0049094822 -0.0471446302 -0.0704952231 0.0457094187 0.0466585421 0.0264082310 0.0035880952 -0.0073701369 0.0267365983 0.0036117751 -0.0184610781 -0.0215437997 0.0228961082 0.0444621267 0.0091446963 -0.0068878732 0.0027937435 -0.0065503365 0.0117061175 -0.0124611272 -0.0065031035 -0.0028859687 -0.0109388295 0.0125931636 -0.0143021890 0.0064916287 -0.0120329385 0.0103697778 0.0107438140 -0.0074239120 0.0121099593 0.0062438432 0.0453041682 -0.0811845705 0.0379917399 -0.0030594695 -0.0428674015 0.0214385150 -0.0043707561 0.0177248067 -0.0040406610 -0.0105644177 -0.0429227291 0.0309314549 0.0196656815 -0.0476722596 0.0437918363 -0.0120314868 -0.0119478931 0.0026911199 -0.0079800945 -0.0056460209 0.0056807223 0.0154992315 0.0141735541 -0.0074385322 -0.0101704768 -0.0047614429 -0.0012360541 -0.0118915974 -0.0076712602 0.0041358606 0.0536595591 0.0747099002 -0.0382693381 0.0334990093 0.0553830258 -0.0273761169 -0.0012325914 -0.0211460391 0.0065508138 0.0177481035 0.0495824396 -0.0224110085 0.0363890861 0.0651444204 -0.0397202982 0.0007011171 -0.0052486617 -0.0010168175 -0.0006868299 -0.0051660923 0.0030349972 0.0001728030 0.0080698153 0.0083680285 -0.0000486189 0.0031915353 -0.0110800911 0.0145045861 -0.0043252593 -0.0088252780 -0.0071400152 -0.0239956747 0.0017335598 -0.0194608704 -0.0086208699 0.0043997531 -0.0354369066 0.0315668033 0.0190106270 0.0141011850 -0.0147899006 0.0204169839 -0.0456985674 0.0014352347 0.0519320255 -0.0038466557 -0.0398680545 0.0037289724 0.0346389987 0.0124203391 -0.0156377147 -0.0689104307 -0.0262557638 0.0005054224 0.0274432105 0.0006414376 -0.0352365572 0.0012764687 0.0180081616 -0.0026335465 0.0103209609 0.0011176200 0.0060291995 0.0063373326 0.0282555855 -0.0011717618 0.0218676121 -0.0180318769 0.0116597312 -0.0415017130 0.0335628860 0.0003134712 0.0219472981 -0.0091233383 0.0223171700 -0.0099246302 0.0136961111 -0.0022844269 -0.0313457927 -0.0136035244 -0.0128816438 0.0174117438 0.0104103075 -0.0134359112 -0.0285513571 0.0073780604 -0.0390788433 -0.0257623958 -0.0315955863 -0.0292476953 -0.0602749341 -0.0302314952 -0.1136796930 0.0225136744 0.0363046298 0.0143629757 -0.0240333061 -0.0016707215 -0.0667567505 0.0308271275 0.0119401737 -0.0004528069 -0.0375564263 0.0128460429 0.0139937795 0.0502566526 0.0376730546 -0.0246332746 0.0470759447 0.0372470224 -0.0235879575 0.0006832364 -0.0003915308 0.0045806250 -0.0212145324 -0.0074511961 -0.0170961010 -0.0071292284 -0.0108739297 0.0045873459 0.0060015466 0.0040354368 -0.0012418751 0.0050825674 0.0013772746 -0.0070038984 0.0042736424 -0.0033891259 0.0088967256 0.0064904442 -0.0040721783 0.0010311593 -0.0036476484 0.0119621220 -0.0044340808 0.0009190855 -0.0001496322 -0.0056026870 -0.0181469256 0.0121659054 0.0167314862 0.0026015049 0.0030196890 -0.0088610801 -0.0014031517 0.0001920369 0.0067226959 -0.0032264917 -0.0011558326 0.0024848649 -0.0010118124 0.0054382078 0.0025514035 -0.0009337709 -0.0082907449 -0.0033156256 -0.0341524227 0.2186506917 -0.1286225109 0.0406900515 0.0752373150 0.0465466571 0.0012436331 0.0479145455 0.0648580037 0.0188005827 0.0131456663 -0.0131426095 0.0290463191 0.0224076560 -0.0172224348 -0.0420204110 -0.0542859085 -0.0039733109 0.0313155736 0.0056851698 -0.0495528578 0.0054672080 -0.0116522039 -0.0189819537 0.0108423249 -0.0265881487 -0.0455286271 -0.0300444168 -0.0611506525 -0.0330670416 0.0547405693 0.0621140462 -0.0158887301 0.0034356921 -0.0020969156 0.0386790218 -0.0096700383 0.0252342202 0.0263119026 0.0140760383 -0.0514139083 0.0961600470 0.0072079195 -0.0052995359 0.0113551053 -0.0132305457 0.0218529926 0.0019031473 0.0539113044 -0.0498674113 0.0075422053 -0.0422610888 0.0234655399 -0.0104478919 -0.0503487706 0.0354127983 -0.0241420652 0.0422286016 -0.0317380235 -0.0067433000 -0.2460795897 0.3668623815 -0.1093534031 0.1633913418 -0.2766759776 0.0538292205 0.2440245902 -0.3740707609 0.0503123642 -0.1677795759 0.2377445429 -0.0896409984 0.0855748687 -0.1193113767 0.0347508784 -0.0300409313 -0.0369541484 0.0023831352 -0.0854424285 0.0178320419 -0.0066688891 -0.0073062194 -0.0050622207 0.0027052539 -0.0009807326 0.0072455200 -0.0160788124 0.0059344235 -0.0129291619 -0.0065650483 -0.0129256129 -0.0153676319 -0.0107466987 0.0336659220 -0.0127788629 0.0394750753 -0.0277036724 0.0214564602 -0.0138957263 -0.0156856710 0.0089917059 -0.0341509113 -0.0296634042 0.0205131378 -0.0414816196 0.0083733171 0.0105380469 0.0047042467 -0.0001441296 0.0015456637 0.0011927105 0.0283970716 -0.0418392503 0.0748184570 0.0344338477 0.0222638116 -0.0877346161 0.0203950615 0.0340144670 -0.1253898244 0.0026174724 -0.0294953472 0.0391177770 -0.1508421201 -0.0284305254 -0.0481415197 -0.0180508599 0.0067468487 0.0350561116 0.0324692870 -0.0211566591 0.0774269898 -0.1166639698 0.0407602962 0.1721443968 0.1780316579 -0.0826939784 -0.0910261009 -0.0138165787 -0.0021258494 0.0055245338 -0.0133727088 0.0005639695 0.0092984858 0.0105182396 -0.0127254018 -0.0209114251 -0.0054118442 0.0044719090 -0.0022369695 -0.0002184591 0.0010598661 -0.0054350013 -0.0000499017 0.0010622487 -0.0028209233 -0.0050955080 0.0109998627 -0.0062907484 0.0084129647 -0.0126786380 0.0083374004 0.0093486894 -0.0095766627 0.0093352379 0.0117825963 -0.0194213968 0.0060532442 0.0090633873 -0.0256090783 0.0131190604 -0.0033453616 -0.0128388465 0.0030878423 -0.0348720926 0.0814891132 -0.0446431898 -0.0341907963 0.0906680969 -0.0518659423 0.0074765485 0.0083275782 0.0014537014 0.0036948201 0.0058229001 -0.0000604729 -0.0066299603 -0.0076235010 0.0040357485 0.0032871672 0.0009658870 -0.0028198230 0.0057210921 0.0013925570 -0.0057514816 -0.0288186246 -0.0435173854 0.0247533312 -0.0254194518 -0.0306231957 0.0175924208 -0.0019994714 0.0123036326 -0.0043071543 -0.0123809032 -0.0184977960 0.0075765141 -0.0135917587 -0.0313981255 0.0148888938 0.0004151771 0.0046801432 0.0056511213 0.0000730597 0.0028077358 -0.0059462896 0.0000854197 -0.0054277376 -0.0061273222 0.0001412432 -0.0011618329 0.0080551934 -0.0033744557 0.0012465682 0.0019181308 0.0018053598 0.0061923350 -0.0012937029 0.0037733437 0.0042001693 -0.0021891724 0.0077911865 -0.0078135821 -0.0053542163 0.0006142387 0.0048629914 0.0061035535 0.0120584227 -0.0015435207 -0.0089424449 0.0015680184 0.0098537282 0.0006916686 -0.0086635043 -0.0039535450 0.0060700374 0.0107870894 0.0074512083 -0.0105175287 -0.0133769729 -0.0004200304 0.0000034225 0.0006579785 -0.0062932989 0.0013639969 -0.0038085578 -0.0009235417 -0.0016206602 -0.0026760168 -0.0095424448 -0.0006473147 -0.0084941999 0.0076225309 -0.0062082221 0.0097767619 -0.0107549236 0.0057804676 -0.0131042135 0.0041095244 -0.0036381568 0.0023028778 -0.0070306156 0.0012448761 0.0109978839 0.0050612584 0.0053523739 -0.0049655669 -0.0061381473 -0.0031793683 0.0111347827 -0.0020850219 0.0120398675 0.0101745462 0.0137696431 0.0104207742 0.0232578599 0.0159967891 0.0463032648 -0.0076644606 -0.0061645644 -0.0006047149 0.0068880285 0.0011264833 0.0228567287 -0.0137889578 -0.0032075875 -0.0004119536 0.0237074723 -0.0091190602 -0.0132749158 -0.0270839359 -0.0141518654 0.0129827822 -0.0200761388 -0.0184240261 0.0185401425 -0.0287736967 -0.0086743878 -0.0027108612 0.1031277876 0.0466712748 0.0749554305 0.0185325869 0.0666010679 -0.0166770807 -0.0082726675 -0.0247048692 -0.0031478666 -0.0074201964 -0.0315594741 0.0128866906 0.0119288437 0.0320367634 -0.0078992386 0.0058914810 0.0156003446 0.0061283596 -0.0276188000 -0.0704606865 0.0126546428 -0.0415304922 0.0203597980 -0.0000320363 0.0760178842 -0.0699734163 -0.1499585919 0.0421458887 0.0203825654 -0.0101661087 0.0184556812 -0.0125157011 -0.0013103213 -0.0164139447 -0.0057608875 0.0067107659 -0.0051380215 0.0130151619 0.0063475482 -0.0075290600 -0.0053346643 -0.0101977604 0.0347914918 -0.2160138507 0.1175253625 -0.0192397048 -0.0721670306 -0.0286019085 -0.0037301997 -0.0366074457 -0.0525716757 -0.0145357315 -0.0111548354 0.0093308317 -0.0268323417 -0.0146448440 0.0110468688 0.0350066546 0.0412885599 0.0043083480 -0.0204794088 -0.0053023087 0.0390907843 -0.0008586797 0.0085201733 0.0160542565 0.0134349874 -0.0010293097 0.0480805345 0.0117878129 0.0579525968 0.0229891975 -0.0615579071 -0.0312492697 0.0001134966 -0.0062951554 0.0060290782 -0.0324316507 0.0157207497 -0.0186942688 -0.0092640135 -0.0030628014 0.0377014799 -0.0545985174 -0.0109742664 0.0173198763 -0.0080269806 0.0002865326 -0.0023240177 -0.0035288378 0.0114447922 -0.0216308646 0.0089985959 -0.0022057055 0.0130116310 -0.0007732834 -0.0048756456 0.0249487294 0.0010419277 0.0020752138 -0.0177279223 0.0114682240 -0.0739897438 0.0975539029 -0.0275009076 0.0753416041 -0.1107541039 0.0154230400 0.0768047045 -0.0996691066 0.0434092911 -0.0815334264 0.1093403422 -0.0087740930 0.0054801700 -0.0095676452 -0.0016031329 0.0228743685 0.0301250205 0.0004467767 0.0745609832 -0.0195394335 0.0051700254 0.0213876590 0.0520457602 -0.0261757671 -0.0067514889 -0.0072645957 0.0469973773 -0.0136697466 0.0244477978 0.0422111975 0.0315014123 0.0652090637 0.0114397745 0.0416705060 -0.0455187891 0.0226518472 -0.0435915947 0.0307036399 -0.0039550444 -0.0284223127 0.0136131160 -0.0169448680 -0.0343858470 0.0262825820 -0.0349363111 -0.0291244499 -0.0305513536 -0.0172689435 0.0009451678 -0.0083688755 -0.0106218370 0.0481028946 -0.1032514941 0.1570374773 0.0589824946 0.0301034190 -0.1331775306 0.0370475633 0.0310296443 -0.1775907674 -0.0718537396 -0.0387619290 -0.0213134817 -0.0738376071 -0.0386783071 -0.0354193907 0.0235753458 -0.0058777384 0.0119559197 0.0036865441 -0.0130339521 0.1004771442 -0.1256821714 0.0408473226 0.1839381486 0.1598258233 -0.0795673841 -0.0845812068 0.0516392368 0.0047402394 -0.0204891123 0.0559311449 0.0049636004 -0.0400262021 -0.0309303585 0.0339890078 0.0705104848 0.0020178095 -0.0283416256 0.0174181978 -0.0030339827 0.0330760881 -0.0281989837 0.0033084421 0.0255330491 -0.0119065256 0.0051886313 -0.0420695328 0.0253578773 0.0014792317 0.0132917260 -0.0096583254 0.0010972960 0.0255533477 -0.0049266514 0.1254063594 -0.1898456013 0.0970877181 0.0819757422 -0.1355043381 0.0653738178 -0.0406640641 0.0310293541 0.0004420174 0.0455691966 -0.0644085833 0.0389303419 0.0716022183 -0.0980053284 0.0564498448 -0.0141463584 -0.0408896613 0.0293269924 -0.0050446619 -0.0376000350 0.0088562079 0.0243173189 0.0595929969 -0.0308615044 -0.0049602479 -0.0281008679 0.0204712798 -0.0163257187 -0.0447211354 0.0164604203 0.1891266267 0.1860700991 -0.0940993701 0.1497403156 0.1474569889 -0.0746008441 -0.0639875724 -0.0311256888 0.0078262503 0.1399458551 0.1365035164 -0.0762291033 0.1754907782 0.1839248547 -0.0986891694 0.0188876041 -0.0017560707 0.0257904728 0.0003734770 -0.0138004526 -0.0305458329 0.0193751108 -0.0038574986 -0.0347344738 0.0118018161 0.0192724822 0.0350283478 0.0150101989 0.0020234669 -0.0025798985 -0.0017680495 -0.0290144012 0.0001409980 -0.0094726451 -0.0115126441 0.0062620977 -0.0205495575 0.0237076980 0.0150524531 -0.0094640666 -0.0114129087 -0.0285800854 -0.0274739928 0.0090465003 0.0282550408 -0.0135257811 -0.0396487158 0.0016392672 0.0184289195 0.0140275260 -0.0178075879 -0.0449574888 -0.0317126528 0.0537466110 0.0390381085 0.0188532954 0.0232989301 0.0107788659 0.0207393616 -0.0026015958 0.0084716049 -0.0032985569 -0.0030293005 -0.0061396086 0.0327691897 0.0029333160 0.0010546255 -0.0134207181 0.0173835918 -0.0037397645 0.0321410009 -0.0744490812 0.0376401037 -0.0341047652 -0.0660338218 0.0033667432 0.0142499363 -0.0064350429 -0.0117566570 -0.0119584698 -0.0091319694 -0.0157097307 0.0156211824 0.0620819776 -0.0105355713 -0.0120335694 -0.0112156237 -0.0399385686 -0.0403510009 -0.0406510610 -0.0655050662 -0.0648821421 -0.1491977339 0.0182784728 0.0013103648 -0.0277641273 -0.0068791497 -0.0043922766 -0.0433005334 0.0470120499 0.0261586049 0.0012113092 -0.0148505565 0.0006736303 -0.0103189807 0.1105556839 0.0616700427 -0.0520680742 0.0363212953 0.0259140924 -0.0207740772 -0.0093988962 -0.0038285303 -0.0053669106 0.0642311169 0.0180798531 0.0518171810 0.0126991933 0.0306620094 -0.0129308573 -0.0055882556 -0.0069924071 -0.0007631464 -0.0031238137 -0.0104517952 0.0109657542 -0.0030397621 0.0152164542 -0.0050362754 -0.0033409314 0.0120115659 -0.0010627702 -0.0062928343 -0.0270489962 0.0038845592 -0.0124577945 0.0062032458 -0.0002421302 0.0244438951 -0.0273132728 -0.0414421783 0.0153357275 0.0044538359 0.0007895074 0.0035224482 -0.0025494106 -0.0073301378 -0.0044471912 -0.0037696406 0.0022372108 -0.0029641554 0.0005395439 -0.0010685274 0.0000928879 0.0071576547 0.0015406141 0.0298187422 -0.2229167987 0.0955699674 0.0720415973 -0.1221340104 0.0349133007 -0.0153592702 -0.0137408812 -0.0394124768 -0.0179995868 -0.0037826293 -0.0042302472 -0.0448636202 0.0107123821 0.0029064282 0.0361011935 0.0293279011 0.0089972581 0.0142355619 -0.0138312181 0.0343366399 0.0144568780 -0.0107060673 0.0212684990 0.1263386349 -0.1021937299 0.1151638798 -0.0433099686 0.0932640320 -0.0035855283 -0.1444139670 0.0749187382 -0.0625775271 -0.0149270520 -0.0007673149 -0.0358940971 0.0263400011 -0.0057051476 0.0228896050 -0.0074777136 0.0577783358 0.0132377628 -0.0124587555 0.0223142143 -0.0024953835 0.0018634261 0.0014033154 0.0047765442 0.0202773057 -0.0254604266 0.0052666820 -0.0165006052 0.0046203315 -0.0031703816 -0.0228324943 0.0158063653 -0.0099627764 0.0166991251 -0.0141045655 -0.0006748505 -0.0847550962 0.1199896467 -0.0347567911 0.0713693431 -0.1399950217 0.0141887963 0.0862148231 -0.1339501146 0.0134305870 -0.0915921007 0.1305024779 -0.0393992369 0.0137194115 -0.0102722672 0.0074537424 0.0091382960 0.0222868510 -0.0043578213 0.0945127406 -0.0515105029 -0.0029050374 0.0082510064 0.0097995432 -0.0053239857 0.0217520272 -0.0022421331 -0.0691354714 0.0340887681 -0.0288484741 -0.0644206498 -0.0466303452 -0.0872853278 -0.0134613150 -0.0044102486 0.0873913488 0.0078730147 0.0077894118 -0.0609461385 -0.0166997629 0.0162839397 -0.0643760355 -0.0036408070 -0.0068123805 -0.0536605791 0.0051304885 0.0300650669 0.0351678869 0.0204566899 -0.0110428422 0.0122736196 0.0224876155 0.0072417658 0.1592373906 -0.1157657230 0.0043355439 -0.0701670206 0.2772178883 -0.0356696615 0.1109452328 -0.0123418831 0.2007197443 0.1201299313 0.0681079229 0.0430114424 0.1122457878 0.0533899480 -0.2869076345 0.0353883390 -0.0860182911 0.1699365111 -0.0520628461 -0.1748961713 0.0085222172 0.0864560315 -0.0245862000 -0.0558845501 0.1088230999 0.0922035977 -0.0761259482 -0.0032891625 0.0422629444 -0.0825982706 0.0016661598 0.0624084443 0.0279500815 -0.0414060319 -0.0765782441 0.0020094117 -0.0166549251 0.0101737674 -0.0017305235 0.0171261135 -0.0233865544 -0.0006165907 0.0099878689 -0.0119051336 0.0044610106 -0.0228540078 0.0134563542 -0.0004211141 0.0096311552 0.0018006040 0.0021954221 0.0184448576 0.0033333267 0.0798195492 -0.1180079873 0.0535099327 0.0371711136 -0.0838395998 0.0394259399 -0.0288441859 0.0144745920 0.0014467184 0.0158781180 -0.0359502355 0.0263117182 0.0442303033 -0.0489343965 0.0345893161 -0.0086777317 -0.0147324582 -0.0039235810 -0.0004326161 -0.0114958008 -0.0054816306 0.0054328061 0.0142597984 -0.0075027943 -0.0008455300 -0.0030629464 0.0120878364 -0.0077520649 -0.0036632770 0.0141627499 0.0410521142 0.0547422854 -0.0361218352 0.0441172064 0.0308869682 -0.0206552506 -0.0017369913 -0.0175120864 0.0038339475 0.0419429402 0.0287634241 -0.0139060380 0.0337199540 0.0602612237 -0.0232919156 0.0124689451 0.0009091831 0.0195614583 0.0000109118 -0.0078568235 -0.0225876209 0.0019155552 0.0055856891 0.0043498980 0.0015007052 0.0038429504 -0.0055672624 0.0082047057 -0.0011655362 -0.0039052154 -0.0011265803 -0.0155711187 0.0029118672 -0.0056464952 -0.0091223663 0.0066830275 -0.0144234587 0.0166304371 0.0120016593 -0.0110088976 -0.0080798758 -0.0310029757 -0.0247649245 0.0073809371 0.0115761327 -0.0082208283 -0.0239092135 -0.0020562408 0.0130445150 0.0086993640 -0.0138210702 -0.0172580266 -0.0205901454 0.0417067259 0.0333846929 0.0058611510 0.0209847755 0.0014683282 0.0086653737 -0.0011289958 0.0037830017 -0.0010885919 -0.0000483498 0.0005601223 0.0120611886 0.0008887416 0.0055627304 -0.0079498794 0.0072585356 -0.0079264563 0.0128009736 -0.0183825416 0.0144676039 -0.0107977258 -0.0100766714 -0.0001168369 0.0075645824 -0.0016103612 -0.0078720654 -0.0048769640 -0.0045093882 0.0002587989 0.0074036836 0.0140731240 -0.0075653004 -0.0008971333 -0.0087789419 0.0631413798 0.0507578881 0.0610143671 0.0749948822 0.1110778667 0.2015000708 -0.0108979874 0.0327545917 0.0793454569 -0.0119829906 0.0064194186 0.0163960548 -0.0722606736 -0.0444013592 -0.0111912302 -0.0154325079 0.0214076526 0.0394776557 -0.2090833674 -0.1051996293 0.0966293157 -0.0090574433 -0.0070713035 0.0319804247 0.0219852784 0.0062274751 -0.0115242799 -0.0378482160 -0.0370234220 -0.0304462160 -0.0023661693 -0.0448847658 0.0031858776 -0.0035284847 0.0202196949 -0.0029546977 0.0048042939 0.0264392823 0.0114635135 -0.0174676731 -0.0274627318 0.0078769590 -0.0051766825 -0.0068644599 -0.0086427707 0.0392784126 0.0435318652 -0.0072906920 0.0445899340 -0.0191952882 0.0027427811 -0.0537684326 0.0404333277 0.1676625792 -0.0355263166 -0.0187517525 0.0076864920 -0.0270642706 0.0224449367 -0.0228939210 0.0165534645 -0.0030002605 0.0039486948 0.0051944854 -0.0125819787 -0.0102162933 0.0083722229 0.0218852173 0.0088390849 0.0575438490 -0.3975616315 0.2033085195 0.0979665465 -0.1781613571 0.0410122528 -0.0201852528 -0.0248937311 -0.0642112009 -0.0255891090 -0.0069810982 -0.0046030840 -0.0679963279 0.0116202147 0.0079278543 0.0562715245 0.0484067659 0.0128726771 0.0168189511 -0.0219196632 0.0552626026 0.0191798245 -0.0135246954 0.0335984642 0.1756475690 -0.1374108785 0.1712302918 -0.0591014185 0.1412702479 -0.0034715059 -0.2093827141 0.0949009430 -0.0848681828 -0.0234307485 0.0043819590 -0.0581607653 0.0397860838 -0.0141194966 0.0189118819 -0.0262318652 0.1308054117 -0.0414524477 -0.0169728147 0.0282922216 -0.0052295582 0.0075777594 -0.0061252694 0.0115018381 0.0037492300 -0.0141883269 0.0012225180 -0.0096262389 0.0042090881 -0.0051124945 -0.0138294771 0.0055955379 -0.0048172914 0.0117238098 -0.0092996460 0.0004873537 -0.0286246013 0.0285156593 -0.0070727008 0.0570843545 -0.1091781062 0.0029831984 0.0305904511 -0.0507127453 -0.0032181570 -0.0693130096 0.0991256509 -0.0281430332 -0.0232668155 0.0432798120 -0.0003175616 0.0129783732 0.0341929560 -0.0103695959 0.1779015828 -0.1000524773 -0.0037795650 -0.0216403446 -0.0486544506 0.0249899542 0.0026326486 -0.0110845064 0.0260176937 0.0002294330 0.0146775344 0.0169200829 0.0179369161 0.0406065321 0.0078691334 0.0228603361 -0.0195577965 0.0345976670 -0.0208214375 0.0111901458 -0.0166294023 -0.0107361200 0.0026500271 -0.0293986588 -0.0256387151 0.0075464333 -0.0346569172 -0.0212364510 -0.0207281044 -0.0111765160 -0.0039510230 -0.0039295286 -0.0014892832 0.0180481524 -0.0106609929 0.0340371939 0.0272226164 0.0109813588 -0.0475437523 0.0116777493 0.0370895038 -0.1029791356 0.0150181678 -0.0198322293 0.0362397440 -0.1248706600 -0.0158804798 -0.0366972761 -0.0267086088 0.0047406410 0.0276364138 0.0525564252 -0.0275750655 0.0388774290 -0.0987971121 0.0464201706 0.1444444987 0.1371510658 -0.0537498865 -0.0620113598 0.0252648090 0.0041635845 -0.0050004211 0.0272019529 0.0045729267 -0.0178352976 -0.0246791720 0.0228346624 0.0497062760 0.0025257984 0.0103589668 -0.0065753158 0.0045827977 -0.0215663794 0.0003756233 -0.0054995345 -0.0196490613 -0.0052673862 0.0018671110 0.0131936820 -0.0086901859 -0.0066210368 0.0043444187 0.0149243526 0.0003645341 0.0005931401 0.0119996161 -0.0471097410 0.0904805509 -0.0583592505 -0.0584069172 0.0654875162 -0.0375701309 0.0034579924 -0.0107641495 0.0019954570 -0.0254270204 -0.0017485348 0.0091076958 -0.0098694295 0.0243235567 -0.0007874599 0.0160721373 0.0406086519 -0.0202167318 0.0042534566 0.0392994349 -0.0022296559 -0.0179424734 -0.0518671319 0.0271523520 -0.0001807418 0.0206262808 -0.0245391950 0.0132712060 0.0322872169 -0.0222076272 -0.1676125244 -0.1752451453 0.0929682629 -0.1532553062 -0.1406150100 0.0757592246 0.0488322228 0.0313074057 -0.0088744609 -0.1264237756 -0.0996118296 0.0566071125 -0.1353055876 -0.1469560883 0.0680470173 -0.0028729292 0.0023296228 -0.0013244037 -0.0000610040 0.0028602803 0.0022637027 -0.0162470695 -0.0000827505 0.0255781804 -0.0099399555 -0.0161354500 -0.0245616770 -0.0060571478 -0.0036809492 0.0004992770 -0.0015647569 0.0148643342 0.0026349231 0.0000463366 0.0040038607 -0.0045059034 0.0027242467 -0.0071932001 -0.0054751816 0.0149280130 0.0009708128 0.0295007161 0.0083045699 -0.0076609910 0.0032675250 0.0102399897 0.0170142682 -0.0006034328 -0.0002746156 -0.0058933193 0.0067446450 0.0103629474 0.0160171328 -0.0428917751 -0.0162750725 -0.0157645508 -0.0290189001 -0.0102328985 -0.0050846951 0.0080565680 0.0011434354 0.0014131679 0.0060733807 0.0089515210 -0.0081373840 -0.0069021852 0.0113838578 0.0018933861 -0.0112568268 -0.0300571914 -0.0031317951 0.0698521637 -0.0329814607 0.0246794403 0.0858878313 -0.0111024398 -0.0066594490 0.0050209813 -0.0094674472 0.0014791687 -0.0010529346 0.0244426428 -0.0102080954 -0.0719375472 -0.0117904198 0.0152479050 -0.0109505427 -0.0199768919 -0.0283948487 -0.0208414306 -0.0534183569 -0.0260436688 -0.0999503038 0.0240793671 0.0300785911 0.0158446982 -0.0176052194 0.0010737159 -0.0571374786 0.0235818800 0.0082456436 -0.0025990857 -0.0421969734 0.0126614972 0.0151597944 0.0345667233 0.0278741927 -0.0189494738 0.0441908505 0.0321337244 -0.0148557058 0.0064749804 0.0011038466 0.0029351689 -0.0270837725 0.0022219902 -0.0494265083 0.0031185565 -0.0061031755 0.0058992808 0.0014038186 -0.0030184213 0.0048092726 -0.0032211009 0.0019566291 -0.0073188125 0.0015148853 -0.0028662575 -0.0058086910 -0.0027120420 -0.0047429703 0.0022944577 -0.0039859737 0.0030744535 0.0037910585 -0.0024601311 0.0000758097 0.0029650478 0.0133506154 0.0045394142 -0.0376338342 -0.0044248178 -0.0019518999 0.0046607519 0.0003240233 -0.0005011782 0.0035160074 0.0030193006 0.0001661309 -0.0049385226 0.0010250135 -0.0011004072 0.0017974417 0.0002554447 0.0014601781 0.0025346772 -0.0024787464 0.0189463089 0.0079370739 0.0078287050 0.0129327555 0.0081075318 0.0008440641 0.0082375059 0.0113133795 0.0004877379 0.0050964026 -0.0015103667 0.0060559751 0.0039725183 -0.0039486405 -0.0090481416 -0.0102661059 -0.0020520911 0.0026625078 -0.0019770213 -0.0061031239 0.0013548528 -0.0034479064 -0.0032187906 -0.0005581334 -0.0017383650 -0.0110905256 -0.0007784168 -0.0164417351 -0.0096973466 0.0066108263 0.0028345442 -0.0013847005 0.0042006496 0.0054741871 0.0068340904 -0.0067038663 -0.0024090318 0.0020186791 -0.0016552847 -0.0143210249 0.0079786803 0.0028997535 -0.0083085805 0.0013011634 0.0081521454 -0.0136260580 0.0039783703 -0.0339646432 0.0445577748 -0.0122180402 0.0205141771 -0.0215198468 0.0043766173 0.0283597019 -0.0391173703 0.0101500048 -0.0201507999 0.0291637511 -0.0079690752 0.1916240464 -0.2676485616 0.0766040711 -0.1403687299 0.2110800610 -0.0454910988 -0.1907671152 0.2752500039 -0.0624447843 0.1393360024 -0.1944671748 0.0426219158 -0.0661268397 0.0888269471 -0.0202972775 -0.0044776384 -0.0041088509 -0.0007397422 0.0054649111 -0.0185347654 -0.0000651770 0.0056310554 0.0085163440 -0.0045543938 0.0079915536 0.0045451701 -0.0401407761 0.0139227196 -0.0252262965 -0.0277763962 -0.0353787154 -0.0415862019 -0.0149326506 0.0909727870 0.0056582753 0.0458683355 -0.0811110907 0.0109222392 -0.0166704625 -0.0550875752 -0.0082287322 -0.0256587733 -0.0663832704 0.0156406203 -0.0539368475 0.0197929817 0.0210186983 0.0085660332 -0.0054465544 0.0066199898 0.0126916565 0.1045395577 -0.0706530859 0.2248707907 0.1232591669 0.0025463763 -0.0345098311 0.0432244075 0.1373509268 -0.3463847066 -0.0703860382 -0.0066661812 -0.0469375690 -0.0950705886 -0.0071013922 -0.0301503846 -0.1057081632 0.0045305718 -0.0500372589 0.1099774367 -0.0504370741 0.0682196800 -0.2125662069 0.1278081751 0.3031993401 0.2382542275 -0.0625343468 -0.0837678925 -0.0347385652 -0.0019381681 0.0164769700 -0.0398617705 -0.0021888804 0.0304292629 0.0219489520 -0.0300780182 -0.0421309765 -0.0016345316 0.0126176125 -0.0076601636 0.0017550839 -0.0103246303 0.0155976703 0.0011698281 -0.0075586827 0.0083085713 -0.0022401993 0.0133398632 -0.0081050951 -0.0011504249 -0.0044685596 -0.0016099210 -0.0024835706 -0.0102547286 -0.0021674149 -0.0496874465 0.0751232638 -0.0330088623 -0.0273450905 0.0616993367 -0.0292791881 0.0175894608 -0.0079957696 -0.0013796833 -0.0071952110 0.0148905774 -0.0118794205 -0.0239072338 0.0182691676 -0.0124908262 -0.0007007449 -0.0031099416 0.0068733282 -0.0015506561 -0.0018144677 0.0049480948 0.0056133302 0.0105771835 -0.0058070451 -0.0036416578 -0.0067687092 -0.0003154582 -0.0043586247 -0.0098448824 0.0010320967 0.0225701826 0.0175446894 -0.0064474155 0.0133498842 0.0179105073 -0.0042571304 -0.0136658969 -0.0084083812 0.0000907515 0.0249743252 0.0316623881 -0.0204202374 0.0356713080 0.0381926179 -0.0237713292 -0.0074887973 -0.0012419292 -0.0120413699 0.0001050055 0.0045046870 0.0142163200 0.0037078665 -0.0008684821 -0.0063811584 0.0023925057 0.0058193393 0.0073663146 0.0002207264 0.0006122251 0.0009215777 -0.0028204654 0.0018078253 -0.0055328075 -0.0016215525 0.0031211661 -0.0036077715 0.0003296569 -0.0017938747 -0.0020148491 0.0109363874 0.0008084179 0.0257707972 0.0033515907 -0.0028963361 0.0042515075 0.0032641145 0.0023122204 0.0040892792 0.0005468574 -0.0015765182 0.0051151745 -0.0107172939 0.0042289738 -0.0235368418 -0.0179261485 0.0004356242 -0.0262762802 0.0009866437 -0.0021524003 -0.0043296016 -0.0011679715 0.0015980906 -0.0002633218 -0.0012130098 -0.0020564970 0.0034682773 -0.0015203485 0.0003431348 0.0032421764 0.0140450894 -0.0040853263 -0.0137863235 0.0126397129 -0.0006471473 -0.0195572588 0.0025609207 0.0011563254 -0.0020900568 0.0017178879 0.0001775367 -0.0002880534 -0.0068646980 0.0020374382 0.0193091229 -0.0000089152 -0.0013113768 0.0045442276 0.0341073997 0.0311008473 0.0312663818 0.0521883831 0.0584262311 0.1270240493 -0.0176812404 -0.0012201553 0.0246821774 -0.0003496114 -0.0017807840 0.0271769685 -0.0401010433 -0.0205190836 -0.0042842381 0.0172916467 0.0138507754 0.0167017523 -0.1001661982 -0.0607431082 0.0492127581 -0.0140780539 -0.0130974926 0.0288959696 0.0335397938 0.0030288769 0.0044892781 -0.1373880766 0.0179399814 -0.3203105024 0.0308022701 -0.0296044034 0.0295738866 0.0095154545 -0.0092490174 0.0283651940 -0.0130542649 0.0133621030 -0.0305466790 0.0152477339 -0.0099488351 -0.0179096212 -0.0027896716 -0.0202134253 0.0197218360 -0.0405069989 0.0232996559 0.0132191611 -0.0217366250 0.0032405047 0.0033290987 0.0501483042 0.0330746976 -0.2303976025 -0.0000981547 0.0053525258 0.0039758468 -0.0087187220 0.0115477802 0.0069910928 0.0016015042 -0.0024224155 0.0027220114 0.0031724350 -0.0029730501 -0.0021290672 -0.0017006562 -0.0005862760 -0.0011243976 0.0025787889 -0.0290635136 -0.0278491331 0.0540763853 -0.0830416854 0.0312438546 -0.0112540202 -0.0055022568 -0.0220746379 -0.0121603595 0.0002894814 -0.0056422914 -0.0301152245 0.0102460304 -0.0021197035 0.0228098163 0.0160386098 0.0077629993 0.0163166500 -0.0103622978 0.0200365729 0.0129690716 -0.0093874765 0.0145751138 0.0955360062 -0.0819126994 0.0776248532 -0.0435270439 0.0700041615 -0.0062465566 -0.0986856452 0.0610085097 -0.0475657689 -0.0078961183 -0.0135875443 -0.0157544979 0.0153728581 0.0058428211 0.0100876213 -0.0007377919 0.0267585585 0.0232390775 -0.0023455707 0.0069709920 0.0012695669 0.0011016991 0.0021631619 0.0041341502 0.0058669472 -0.0096861584 0.0007071087 -0.0108909342 0.0021695624 -0.0028764291 -0.0127250625 0.0035824887 -0.0067066828 0.0098256441 -0.0062946687 -0.0009721690 -0.0396768078 0.0521309292 -0.0143381403 0.0330415454 -0.0655061922 0.0086373394 0.0391681739 -0.0644316724 -0.0017714110 -0.0396624664 0.0584832087 -0.0195836870 0.0084575004 -0.0001758637 0.0044045542 0.0044803098 0.0092063189 -0.0004702327 -0.0096816234 0.0390429693 -0.0060257124 0.0269236235 0.0404064328 -0.0219689018 -0.0005233648 -0.0013705587 0.0054215015 -0.0013734001 0.0040978748 0.0034429859 0.0045510288 0.0045001605 0.0026271464 -0.0117146846 0.0024239834 -0.0106258814 0.0093653816 -0.0042234587 0.0042991678 0.0062492768 -0.0030981840 0.0078725045 0.0090130786 -0.0044115294 0.0104487252 -0.0025376502 -0.0027029928 -0.0012148779 0.0003470037 -0.0007783871 -0.0013325560 -0.0097792968 0.0074204124 -0.0215709713 -0.0128581595 -0.0039844194 0.0172670632 -0.0053771294 -0.0126289140 0.0405822828 0.0113087184 0.0107648525 -0.0010144963 0.0389678197 0.0083146010 0.0124023211 -0.0015963094 0.0005177406 -0.0058065169 -0.0126967668 0.0067812113 -0.0171046543 0.0327461115 -0.0143988614 -0.0478407270 -0.0445990842 0.0179596952 0.0206823105 0.0042420262 0.0004245022 -0.0013510859 0.0048236921 0.0007514013 -0.0035955656 -0.0032288253 0.0039807828 0.0056632184 -0.0142037978 0.0525768338 -0.0320757175 0.0138285794 -0.0503813891 0.0385365028 0.0013278635 -0.0362203667 0.0143898737 -0.0115072881 0.0549694349 -0.0347947566 -0.0000882430 -0.0196547271 0.0164264826 0.0061097005 -0.0318504949 0.0188789352 -0.1655455999 0.2888300040 -0.1454358930 -0.1162793871 0.2187773060 -0.1147928142 0.0383692347 -0.0439974005 0.0037379667 -0.0803379409 0.1147635550 -0.0685709729 -0.0942058168 0.1537280669 -0.0772246467 -0.0168583459 -0.0275594625 0.0184798527 -0.0093476656 -0.0234261430 0.0065204599 0.0186469851 0.0341080521 -0.0193413294 -0.0048597164 -0.0162048876 0.0123955693 -0.0145899697 -0.0237673076 0.0180738534 0.1203450424 0.1402042559 -0.0661478591 0.1037934751 0.1259280296 -0.0676629794 -0.0269205498 -0.0256734639 0.0078267008 0.0930551153 0.0927956691 -0.0523917139 0.0991582297 0.1173841751 -0.0551309661 -0.0186581685 0.0059632066 -0.0209573065 0.0010747484 0.0165561910 0.0261174227 0.0086407937 0.0033073374 -0.0094200403 0.0045877223 0.0100397258 0.0083805971 0.0121959216 0.0004577668 0.0142128288 -0.0271098142 0.0055219707 -0.0447103761 -0.0225417265 0.0124760492 -0.0333931644 -0.0123814097 -0.0002212367 -0.0109644833 0.1045347393 -0.0119383156 0.2165506494 0.0294513563 -0.0182803089 0.0791883385 0.0249012179 -0.0010810475 0.0375118391 0.0194490153 -0.0049029752 0.0322707811 -0.1242660608 0.0218269616 -0.1900330253 -0.1289175005 0.0096800136 -0.2205201554 0.0154354633 -0.0200686325 -0.0296222793 -0.0172800755 0.0069530385 0.0004175335 -0.0179171768 -0.0262551926 0.0257637733 -0.0300641508 0.0160384522 0.0133733563 0.1199830766 -0.0438454326 -0.1107774851 0.0721197186 -0.0046948716 -0.1685743800 0.0235242507 -0.0075270272 -0.0182704741 0.0332156185 0.0094642510 0.0060250813 -0.0743446510 0.0017937355 0.1489139571 0.0122845343 -0.0126298684 0.0678457827 -0.0048043542 -0.0049767494 -0.0044875265 -0.0099641544 -0.0064582312 -0.0202049186 0.0044349328 0.0040597328 -0.0001045928 -0.0021831014 0.0010449417 -0.0092979683 0.0041628614 0.0028405141 0.0005899352 0.0013821225 -0.0023945080 -0.0039056634 0.0116010982 0.0057803279 -0.0047523698 0.0003944589 0.0006136547 -0.0018995189 0.0080690811 0.0012556872 0.0098451011 0.0679640931 -0.0349116062 0.1768738626 -0.0138525630 -0.0109879217 -0.0148401261 -0.0080124312 -0.0022967322 -0.0308021732 0.0102673013 0.0005960916 0.0091026813 0.0108649234 -0.0048433753 -0.0004832590 -0.0009673595 -0.0133466882 0.0006511889 -0.0109682251 0.0023562454 -0.0104421079 -0.0104017679 -0.0033885030 0.0090870798 -0.0512533048 0.0028597258 0.0378398875 0.0093051734 0.0064592318 -0.0002056575 -0.0039221156 0.0024867672 0.0060899718 -0.0018397198 0.0003778961 -0.0000943853 0.0004055731 0.0024630656 0.0035721265 0.0014481723 -0.0140480642 -0.0019707240 -0.0452938072 0.2726972685 -0.3062536529 0.1016353195 -0.1547020240 0.0688313288 -0.0244888716 -0.0052584384 -0.0337123116 -0.0261478298 0.0043930426 -0.0147664606 -0.0547974246 0.0256262005 -0.0152979233 0.0424002855 0.0185536065 0.0192799554 0.0356484854 -0.0146815542 0.0275660203 0.0310888662 -0.0210410709 0.0261211088 0.2046266543 -0.1867675358 0.1425220688 -0.1194398537 0.1505831264 -0.0237972833 -0.1817649285 0.1349006369 -0.0971105086 -0.0086889695 -0.0573028297 -0.0053405444 0.0201323796 0.0337076890 0.0139310047 0.0208689217 -0.0210906292 0.1169401676 0.0076604515 -0.0037786846 0.0092195814 0.0046772652 0.0010421950 0.0051686393 -0.0064755380 0.0069541609 -0.0053825974 -0.0170990570 -0.0101033138 -0.0012142013 -0.0100758657 -0.0191917597 -0.0109418708 0.0071711415 0.0062436839 -0.0070924607 0.0220116816 -0.0346550516 0.0102901820 -0.0289851397 0.0028855224 -0.0040670563 -0.0270738184 0.0211450093 -0.0481136789 0.0195909684 -0.0166265326 -0.0068471036 -0.0007099545 0.0316761925 -0.0030084276 0.0123894268 0.0077530416 0.0071391888 -0.2502479840 0.2867626975 -0.0190766054 0.0171027874 0.0226314295 -0.0119273873 -0.0054580154 0.0059709830 0.0008839385 -0.0067622344 -0.0035040063 0.0056588476 -0.0014984670 -0.0041980004 -0.0038897452 -0.0009456561 -0.0090596874 -0.0057223215 0.0008295235 0.0092010596 0.0053918950 -0.0020163387 0.0106511657 0.0045386704 0.0043231917 0.0090411119 0.0036028807 0.0053674563 0.0048692495 0.0017675438 0.0043460513 -0.0004405087 -0.0037930670 -0.0021845315 -0.0255534185 0.0177843697 -0.0039290762 0.0107898244 -0.0401311928 0.0051129355 -0.0226446118 0.0133843583 -0.0354297288 -0.0160068558 -0.0164760554 0.0108803043 -0.0171227522 -0.0043275341 0.0498088879 -0.0057840460 0.0098456489 -0.0368581105 0.0131893683 0.0264820989 0.0110011671 -0.0208035806 -0.0138243955 -0.0066960740 -0.0122205993 -0.0085862271 0.0019943168 -0.0016834750 -0.0058326074 0.0026241280 -0.0031880107 -0.0034430968 0.0083997828 -0.0050094219 -0.0113583637 -0.0025562875 0.0177794616 -0.0100241993 -0.0027661277 -0.0051785212 0.0152466244 -0.0022066701 -0.0041827809 0.0089809605 -0.0006932134 0.0148150737 -0.0083443371 0.0033661121 -0.0124052035 -0.0014829567 -0.0015712182 -0.0194252904 -0.0052004666 -0.0320560395 0.0388142988 -0.0104694161 -0.0271688194 0.0388260835 -0.0079014622 0.0239775457 -0.0072537467 -0.0035198957 -0.0206143192 0.0598729112 -0.0389674822 -0.0423289613 0.0449187251 -0.0345929234 -0.0087799153 -0.0134250447 0.0081647208 -0.0054330204 -0.0112524946 0.0050725416 0.0101834287 0.0155263141 -0.0083511645 -0.0052680014 -0.0074278351 0.0032804252 -0.0080845165 -0.0116191438 0.0060694116 0.0537412030 0.0667843793 -0.0306209112 0.0545222523 0.0681702008 -0.0343740029 -0.0111687637 -0.0134796704 0.0041965842 0.0383919353 0.0528398674 -0.0271271280 0.0414753564 0.0489855442 -0.0252313741 -0.0107252390 -0.0022560370 -0.0185063148 -0.0004837111 0.0051835462 0.0216729065 0.0033046420 0.0025448824 -0.0026048470 0.0017928713 0.0044395295 0.0015225658 -0.0205985112 0.0062374895 -0.0335690049 0.0354550829 -0.0028077967 0.0496982877 0.0290283485 0.0076765903 0.0444614152 0.0177120180 -0.0069713983 0.0132429669 -0.1318849993 0.0404093212 -0.2259205328 -0.0598555238 0.0116689909 -0.1290283812 -0.0268593386 0.0126794232 -0.0432990383 -0.0324011853 -0.0034610817 -0.0244739853 0.1536393947 -0.0167413958 0.1985204751 0.1189840952 -0.0217305691 0.2316769153 -0.0124980650 -0.0050881024 0.0167913714 0.0042475776 0.0038442008 -0.0201400935 0.0113601311 -0.0092359105 -0.0199368084 0.0071510989 -0.0001560662 -0.0178692197 -0.0645646418 0.0005422647 0.1058375095 -0.0658949121 0.0078885683 0.1048365126 -0.0080487602 0.0055315745 0.0254317689 0.0025350319 0.0041859532 0.0152904565 0.0729460129 -0.0005118127 -0.1169773916 0.0514735404 -0.0105232522 -0.0612046212 -0.0040730876 0.0027449611 -0.0049285574 0.0071803393 -0.0057283027 0.0074680778 -0.0094797867 -0.0165427255 -0.0215155375 0.0045630880 -0.0033329891 0.0135757032 -0.0002155188 0.0069114829 0.0065398017 0.0454926244 -0.0198782583 -0.0281824623 0.0310905698 0.0064050668 -0.0104874030 -0.0404724670 -0.0298744526 0.0080803587 0.0210026841 0.0185525517 -0.0034040735 0.0473516617 -0.0574958824 0.2589099308 -0.0305688929 -0.0316949562 -0.0163547746 -0.0278729660 0.0174122297 -0.0454635983 0.0207435582 0.0163865548 0.0324704088 0.0184357748 -0.0223725987 -0.0246743197 -0.0267439604 -0.0206242517 0.0365701407 -0.0382762524 0.0351624409 0.0131599693 -0.0002103960 -0.0230816324 0.0058435958 0.0226863154 0.0489578986 -0.2546049569 0.0078220521 0.0079598561 0.0083174498 -0.0112395464 0.0061070729 -0.0211689295 0.0005869758 -0.0060756456 0.0075160948 0.0012462521 -0.0033283220 -0.0046463805 -0.0003348577 0.0131658950 0.0037184052 0.0381987605 -0.2499768906 0.2379027283 -0.0522568338 0.0855245037 -0.0400203781 0.0139625032 0.0024757656 0.0168388308 0.0175924660 -0.0052115500 0.0078634862 0.0273824558 -0.0140584762 0.0127400056 -0.0208573743 -0.0086199546 -0.0107460089 -0.0195722659 0.0094094506 -0.0148271266 -0.0189917779 0.0122516211 -0.0139795326 -0.1101383801 0.1047009071 -0.0688250447 0.0644234743 -0.0781734146 0.0124943836 0.1014947504 -0.0710730401 0.0561193850 0.0007680680 0.0391568398 -0.0063559795 -0.0050505607 -0.0215536942 -0.0002093507 -0.0183689971 0.0388814959 -0.0721217740 -0.0076119704 0.0081435019 -0.0051693659 -0.0026910963 0.0002415850 0.0003793498 0.0086845999 -0.0100658448 0.0036554382 0.0056217857 0.0084481086 -0.0017748319 -0.0021592025 0.0154055772 0.0030314072 0.0027599786 -0.0084997827 0.0032032584 -0.0381976522 0.0557512824 -0.0155640784 0.0414712987 -0.0458950534 0.0056961640 0.0438612558 -0.0577307029 0.0328216979 -0.0428768553 0.0526147774 -0.0129742291 0.0034929029 -0.0207138949 0.0057992092 -0.0092059881 -0.0029187685 -0.0061534873 0.2019627147 -0.2194498927 0.0116606952 0.0393188544 0.0134675977 -0.0103958642 0.0036854061 -0.0050995237 0.0031854675 0.0048345308 0.0043850212 -0.0011758670 0.0038013869 0.0089649066 0.0034542728 0.0017113246 0.0015891821 0.0086912502 -0.0017480159 -0.0031990246 -0.0054011332 0.0011871111 -0.0053813836 -0.0077031066 -0.0048008428 -0.0036064186 -0.0069603611 -0.0065223236 -0.0060720600 -0.0027928186 -0.0034535135 -0.0002854536 0.0022169193 0.0010243417 0.0164418844 -0.0117441121 0.0048426166 -0.0036933755 0.0117771397 -0.0018794705 0.0132212589 -0.0147495308 0.0266352483 0.0047607218 0.0200492531 -0.0291432341 0.0057709416 -0.0042594879 -0.0309231939 0.0047971881 0.0035349389 0.0255055482 -0.0103687184 -0.0084923212 -0.0171480277 0.0147481511 0.0240352945 0.0227063873 -0.0027073248 -0.0054572013 0.0023444159 0.0017472155 0.0033856584 0.0021561503 0.0028640370 -0.0003035959 -0.0091805303 0.0066811794 0.0147062090 0.0211267704 0.0116809687 -0.0081418296 -0.0172965775 0.0019898764 0.0369235370 -0.0132949591 -0.0036148427 0.0166094240 0.0147370865 0.0137157046 -0.0077918142 -0.0106136886 -0.0109386295 -0.0081236614 -0.0223165760 -0.0292391219 -0.0266315153 -0.0742353899 0.0370322961 0.0026761297 -0.0411857267 0.0403046109 0.0037461381 0.0706362833 0.0092266433 -0.0156607962 -0.0173267926 -0.0030356014 -0.0159753135 -0.0572221781 -0.0156978041 -0.0120862892 -0.0326348945 -0.0172981231 -0.0272924973 -0.0183313977 -0.0107106434 -0.0133983251 0.0261515348 0.0039374476 -0.0061929728 -0.0115215987 0.0033952174 0.0198416682 -0.0256737387 0.0167083716 0.0438157142 0.0091260125 0.0972750316 -0.0603864718 0.0298875042 0.0717944318 -0.0648404841 0.0554378983 -0.0481677153 0.0171567549 0.0430620267 0.0735217494 -0.0151706261 0.0069169010 0.1068084940 -0.0209331548 -0.0318983543 -0.0144546874 -0.0669798630 -0.0012757671 0.0104264498 0.0749485064 -0.0162077895 0.0315723515 0.0688706236 -0.0115941152 -0.0075276871 -0.0755185963 -0.0311420136 -0.0006059227 -0.0328948382 0.0381258711 0.0113096170 0.0670571841 0.0339606387 0.0018948918 0.0456345882 0.0228138886 -0.0119122292 0.0093473830 -0.1320690599 0.0347665620 -0.2494306768 -0.0486390141 0.0115742955 -0.1322200612 -0.0196624601 0.0283326801 -0.0506408530 -0.0337760062 -0.0049804928 -0.0290438860 0.1976355996 -0.0078679549 0.2008432508 0.1412490067 -0.0367430979 0.2586723666 0.0189943143 -0.0251536758 -0.0475248091 -0.0225953996 0.0141202337 0.0081779847 -0.0170783688 -0.0298383925 0.0312381812 -0.0263852170 0.0143060246 0.0181595961 0.1355690078 -0.0499112335 -0.1149760790 0.0962836945 -0.0006367047 -0.1872002056 0.0254445645 -0.0043663713 -0.0235257920 0.0288168702 0.0075681451 0.0051780224 -0.0747314792 0.0050261448 0.1633214575 0.0064098916 -0.0124011308 0.0677075383 -0.0006029826 -0.0063993224 0.0005716190 -0.0142346561 -0.0007265264 -0.0232390289 0.0123066337 0.0177509826 0.0182874507 -0.0049513745 0.0039057315 -0.0180077351 0.0035642424 -0.0035012912 -0.0051934582 -0.0355959650 0.0159047776 0.0213304659 -0.0174678265 -0.0006028088 0.0049877982 0.0342655562 0.0245156839 -0.0066728614 -0.0153939119 0.0073346756 -0.0081508615 -0.0102483349 0.0099817110 0.0669937722 -0.0212474789 0.0142995374 -0.0010449748 -0.0018696002 0.0166512172 -0.0065241996 0.0130720298 -0.0030845020 0.0048610211 0.0059239434 0.0009739516 -0.0169251820 -0.0168383251 0.0132558334 0.0378560499 0.0013029276 0.0047936455 0.0301620700 0.0178774063 -0.0052823674 -0.0152932857 0.1337319244 0.0108763312 -0.2352191452 -0.0140883091 -0.0070511351 0.0053708772 0.0178653051 -0.0187130603 0.0054218446 -0.0008027605 0.0078515087 -0.0100421971 -0.0010524330 0.0022355054 0.0023607722 0.0023101866 -0.0091675654 -0.0009791361 -0.0321906150 0.1924683901 -0.2005858385 0.0493970410 -0.0759026767 0.0344020556 -0.0128310370 -0.0023014364 -0.0160709131 -0.0127653700 0.0013263996 -0.0080272298 -0.0276866843 0.0137754159 -0.0084684403 0.0224721740 0.0075515547 0.0108538719 0.0178346264 -0.0045419034 0.0110749657 0.0160454937 -0.0106659831 0.0128042972 0.1068307042 -0.0987070171 0.0726541610 -0.0680516846 0.0813920222 -0.0136579588 -0.0860541571 0.0713331147 -0.0476628964 -0.0045344058 -0.0352271879 0.0002772834 0.0101202282 0.0223727113 0.0076982096 0.0141747690 -0.0197447120 0.0752347835 0.0059519522 -0.0042864291 0.0064408885 0.0034532150 -0.0004627856 0.0025855012 -0.0057568299 0.0074756388 -0.0039437929 -0.0097325821 -0.0073176593 -0.0000724831 -0.0039903773 -0.0147798371 -0.0060191166 0.0028275805 0.0061304422 -0.0050219818 0.0270945275 -0.0391116299 0.0112442446 -0.0276537779 0.0164489326 -0.0045926461 -0.0306160854 0.0329789124 -0.0340582180 0.0232867007 -0.0255034604 -0.0005698271 -0.0049183645 0.0256048720 -0.0041894698 0.0073086820 0.0022522561 0.0048722611 -0.1696965374 0.1820231353 -0.0103283193 -0.0199407406 -0.0365214464 0.0181991312 -0.0035323451 0.0041554140 -0.0000006959 -0.0044259498 -0.0031833526 0.0034338438 -0.0016142092 -0.0027449248 -0.0031667970 0.0018064392 -0.0075556066 0.0002022079 -0.0010736464 0.0075649602 0.0016838174 -0.0021534261 0.0093163559 -0.0003001273 0.0007336828 0.0073234469 -0.0009540274 0.0036791083 0.0033908992 0.0012554183 0.0028112076 -0.0001924196 -0.0023529594 -0.0009030741 -0.0154693215 0.0119289209 -0.0007431844 0.0088583362 -0.0334421426 0.0041317482 -0.0145411255 0.0021164167 -0.0274115476 -0.0175099901 -0.0082253745 -0.0105555956 -0.0162674534 -0.0087487567 0.0382822932 -0.0041879992 0.0121577043 -0.0209829848 0.0068189125 0.0226111901 -0.0014280014 -0.0107515624 0.0037913763 0.0089604575 -0.0142779899 -0.0125870220 0.0009771976 -0.0011504923 -0.0039640386 0.0014234406 -0.0023844956 -0.0020420020 0.0058982398 -0.0037482398 -0.0078343804 0.0191535133 -0.0387303883 0.0228729928 -0.0162427094 0.0384780827 -0.0128665560 -0.0037870225 0.0244721261 -0.0044718337 0.0133236329 -0.0297963564 0.0182745292 -0.0047659578 0.0082434172 -0.0127313484 -0.0120609132 0.0109617019 -0.0198087545 0.0885646986 -0.1938154261 0.1060077647 0.0722744161 -0.1510224222 0.0893508198 0.0006521168 0.0312370718 -0.0083783923 0.0427707078 -0.0802451125 0.0401014794 0.0353053084 -0.0914829817 0.0391107543 0.0078146333 0.0211184744 -0.0153467840 0.0018421418 0.0180174199 -0.0077985599 -0.0115674951 -0.0254602441 0.0124021995 0.0073900238 0.0140748272 -0.0050492505 0.0106522248 0.0244295493 -0.0035027462 -0.0861038728 -0.0896603832 0.0419193413 -0.0880229332 -0.0896816490 0.0408949165 0.0281443031 0.0126526483 -0.0029326898 -0.0692077415 -0.0891911899 0.0481149920 -0.0788371958 -0.0809925818 0.0494040144 0.0001693504 -0.0090108586 -0.0092699905 -0.0016347715 -0.0071951772 0.0098140930 -0.0082539088 0.0020549466 0.0171789389 -0.0051242525 -0.0084637847 -0.0168120657 0.0018139261 -0.0074287859 0.0202134907 -0.0065126834 0.0075337876 -0.0069216455 -0.0048580919 -0.0110442293 -0.0166900038 0.0014829998 -0.0010460592 -0.0110117459 0.0447045778 -0.0222636082 0.0496741450 0.0506033829 0.0043539584 0.0517104688 0.0090999470 0.0024481546 0.0126768184 0.0030232236 0.0017355195 0.0050555060 -0.0250199466 0.0074573001 -0.0543498128 -0.0231615876 0.0092979452 -0.0368243170 0.0431663234 -0.0005987107 -0.0675158039 -0.0207588324 -0.0017776466 0.0495399302 -0.0344781589 0.0110026203 0.0570457205 -0.0306516572 0.0070330997 0.0472364127 0.1977357536 -0.0190133644 -0.2854815506 0.1914222181 -0.0237529036 -0.3331961870 0.0307619106 -0.0123445608 -0.0659445189 0.0065069064 -0.0069366053 -0.0283701743 -0.1885261337 0.0048705900 0.3291969196 -0.1000247266 0.0101496188 0.1530661617 -0.0020824893 0.0024289227 -0.0029699391 0.0063890446 -0.0029726548 0.0081358035 -0.0073755840 -0.0117437560 -0.0144925442 0.0029449336 -0.0030516548 0.0104129383 -0.0002361195 0.0042194625 0.0042267641 0.0294457620 -0.0129605230 -0.0181153576 0.0191155061 0.0041728857 -0.0065331451 -0.0268809295 -0.0201433694 0.0053739044 -0.0250766377 0.0100576333 0.0031514628 -0.0436730723 0.0029651732 0.1072975010 -0.0405886263 0.0048170626 0.0136302068 -0.0280581080 -0.0247557499 -0.0074757768 -0.0174116162 -0.0245385713 0.0194068343 -0.0060581019 -0.0083963415 0.0157295672 0.0052095837 -0.0160156884 -0.0159492058 0.0641548547 -0.0484847665 0.0258136762 0.0346964934 0.0107081326 -0.0052274641 0.1141005699 -0.0594922166 0.1031519158 -0.0169402882 -0.0084168587 -0.0094766395 0.0198207026 -0.0109871546 -0.0162204366 0.0002792698 -0.0003300674 0.0042142837 -0.0012556548 0.0013096703 -0.0055141248 0.0008281575 0.0098790406 -0.0020659580 0.0258770117 -0.2156690979 0.1405388688 -0.0084756736 0.0188638946 -0.0162781742 0.0032295695 -0.0023051042 -0.0021074236 0.0127186117 -0.0119580385 0.0000983294 -0.0026663398 -0.0031174762 0.0142947701 0.0060915786 0.0040778468 -0.0001391959 -0.0038697669 0.0107470098 -0.0050518586 -0.0087028181 0.0058115672 -0.0018752645 -0.0156125122 0.0240013067 0.0119724959 0.0018310173 0.0073994473 0.0052314893 0.0334713373 -0.0014269262 0.0211772694 -0.0130636393 0.0137766866 -0.0237366811 0.0166301985 -0.0011257543 0.0225081930 -0.0183938025 0.0724446327 -0.0033039537 -0.0070490345 0.0141903879 0.0023956058 0.0012975393 0.0015574406 0.0088614128 0.0090290705 -0.0116017981 -0.0000420047 -0.0096131084 0.0025771754 -0.0051221499 -0.0195750705 0.0052553119 -0.0086286245 0.0165615568 -0.0078378305 -0.0046985146 -0.0445346822 0.0614718457 -0.0161815229 0.0429350486 -0.0830957400 0.0050483504 0.0504475266 -0.0878605124 0.0005639614 -0.0608947453 0.0859914122 -0.0386964648 0.0044305049 0.0013260884 0.0086424254 -0.0050177487 0.0000773166 -0.0042476642 0.1238431126 -0.1241059206 0.0047331402 -0.0627140965 -0.0075109804 0.0090997930 0.0062603326 -0.0059806188 -0.0045036678 0.0072879337 0.0023106218 -0.0093326300 -0.0005994667 -0.0037703142 0.0053822491 -0.0080687710 0.0210682851 -0.0116815753 0.0067057447 -0.0184471646 0.0014506514 0.0063485626 -0.0194935185 0.0098504894 0.0040252593 -0.0177895515 0.0118008871 -0.0022726488 -0.0021041286 -0.0004223538 -0.0043295358 0.0014398288 0.0046718657 -0.0000529542 0.0254012103 -0.0240187471 -0.0082064101 -0.0215547927 0.0868221202 -0.0109878542 0.0251804096 0.0179041399 0.0484183712 0.0446983689 0.0006854478 0.0641161718 0.0410401126 0.0302344064 -0.0719271406 0.0062295611 -0.0400126289 0.0314743990 -0.0075295259 -0.0583648946 0.0264529423 0.0139539374 -0.0423524780 -0.0569192048 0.0475715976 0.0456853615 -0.0063165951 0.0016049268 0.0076975788 -0.0075546670 0.0032413116 0.0069439194 -0.0054664061 0.0022721484 0.0043547517 0.0431709485 0.0018199058 -0.0033708833 -0.0489651202 0.0655335160 0.1270132129 0.0009279348 0.0462186202 0.0760833892 0.0359821176 0.0111574564 -0.0076403177 -0.0133480952 -0.0477804558 -0.0764684708 -0.0666904576 -0.0884716593 -0.1091244837 -0.1130244320 -0.0515000492 0.1449459997 0.0412107234 0.0134218727 0.0816901052 0.1979985198 0.0515704993 -0.0506740199 0.0203070321 -0.0300896842 -0.0755160774 -0.1470091988 -0.1038597572 -0.0369569755 0.0744987153 0.0452891730 0.1311966549 0.0209690649 0.0502292047 0.0798914400 -0.0467012519 0.0112844584 0.0010915686 0.0045300150 -0.0360041084 -0.0890079030 0.0518491152 -0.0835332241 -0.1328678903 0.0827905213 -0.1371478896 0.1521458460 -0.0742800367 -0.0450214445 0.1254218253 -0.1875958387 0.1207529438 -0.0445416035 -0.0620942358 -0.0736339686 -0.0575526099 0.0882617063 -0.1866546952 -0.0292885843 -0.0884653444 -0.0479525557 -0.1939616854 -0.0026271357 0.0237512830 0.2186186483 0.0546940906 -0.0910045523 -0.2129512564 0.0363601183 0.0325532702 0.2331883896 -0.0203926016 0.0038804515 0.0071647082 0.0070463631 0.0157270759 0.0166390389 0.0160389084 0.0056584078 -0.0017342125 0.0287206250 -0.0306461627 -0.0184143457 -0.0145810692 0.0109798064 -0.0238593653 0.0361533855 -0.0171678138 -0.0307164999 0.0108556030 0.0412110048 -0.0119582362 -0.0174924155 -0.0061494721 0.0038122359 0.0671239342 0.0308562623 -0.0009089670 0.0072246952 -0.0084213569 0.0433743923 0.0026346093 0.0359992524 0.0034679867 0.0295339512 -0.0072257267 0.0309955081 0.0007763975 0.0821934268 0.0018291804 0.0325222501 -0.0329716896 0.0301951611 -0.0414930373 0.0871067796 -0.0904578327 0.0603165374 -0.0278919630 -0.0095464187 -0.0114875603 0.0299638755 -0.0222829441 -0.0697778004 -0.0378004627 -0.0458483023 -0.0159782210 0.0274829292 0.0639076697 -0.1127121953 0.0033283211 -0.0085591783 0.0060155631 -0.0016760835 0.0049077643 -0.0076443715 0.0145728245 -0.0000000408 0.0100515630 0.0250526373 0.0293875072 -0.0127551707 0.0015790058 -0.0245270211 -0.0058571865 -0.0071607990 -0.0043099415 -0.0251389439 0.0120750404 0.0174581887 -0.0345652489 -0.0139590822 0.0155585740 0.0227861576 0.0181245504 -0.0022506338 -0.0344716160 0.0109832742 -0.0111344928 -0.1384032615 0.0093148150 -0.0443945932 -0.0555969965 -0.0101658816 0.0260755601 0.0262941722 0.0024923965 0.0333503157 0.0018231956 0.0013685203 -0.0129676765 -0.0023145331 -0.0041120840 0.0163780777 0.0249901989 -0.0035612137 -0.0314056168 -0.0257545426 0.0272395975 -0.0308411171 -0.0207606965 -0.0015389829 0.0084347495 -0.1404487617 0.0275543380 0.1287914466 0.0088523321 0.0064470521 -0.0064904805 0.0146214821 -0.0169559495 0.0057297129 -0.0054262588 0.0014586137 -0.0022116370 -0.0026109781 0.0035275647 0.0021981391 -0.0006986018 -0.0026009595 -0.0020814922 -0.0088929018 0.0163703147 -0.0531622850 0.0090794020 -0.0175986692 0.0027167653 -0.0035797851 -0.0030652841 -0.0074172228 0.0023000083 -0.0075151694 -0.0029837944 -0.0111819970 0.0028927775 0.0043341774 0.0125860366 0.0055716011 0.0047867319 0.0041939184 0.0066921180 -0.0003158798 0.0009517802 0.0001272035 0.0033161408 0.0292254666 -0.0234557138 0.0311833073 -0.0252511999 0.0361622921 0.0013854860 -0.0085123133 0.0262247675 -0.0048426709 -0.0086996035 -0.0130978756 -0.0103276196 0.0139702179 0.0136092556 0.0168157784 0.0015005996 0.0188182875 0.0481638656 0.0003749121 0.0044815570 0.0056907601 0.0027112907 0.0001288065 0.0053384294 0.0014956672 0.0000735582 -0.0025844448 -0.0108135439 -0.0044417180 -0.0020607025 -0.0116853406 -0.0076616606 -0.0080461047 0.0092957571 0.0010059439 -0.0060517975 0.0006309783 0.0007679704 -0.0003151470 -0.0011214866 -0.0276307518 -0.0026886296 0.0015199470 -0.0173146831 -0.0221369796 -0.0104391979 0.0192583906 -0.0184498538 -0.0005352581 0.0160747780 0.0009948740 0.0020326760 0.0003809386 0.0018311235 -0.0360462029 0.0372466461 -0.0023896803 0.0339685486 0.0251418629 -0.0145636654 -0.0004515188 0.0004231908 0.0007005903 -0.0001342447 -0.0006031045 0.0013447942 0.0000939376 0.0014416162 -0.0007022149 0.0029690372 -0.0028954728 0.0041496461 -0.0027077349 0.0025931912 -0.0011752530 -0.0012049066 0.0014163677 -0.0036760316 -0.0027551572 0.0024449220 -0.0040627298 -0.0003015358 -0.0001308502 -0.0003282319 0.0001262063 -0.0001325715 -0.0002787087 0.0019088872 -0.0019134661 0.0054781256 0.0044350074 0.0028992934 -0.0127643757 0.0023537657 0.0003452806 -0.0112065880 -0.0008585240 -0.0053715676 0.0051648420 -0.0178831642 -0.0050723618 -0.0059939383 0.0009092906 0.0007550253 0.0066536382 0.0015556381 -0.0015963012 0.0089314196 -0.0111336146 0.0027614673 0.0164642572 0.0174115066 -0.0092235560 -0.0097577910 0.0010200754 0.0000577928 -0.0004534806 0.0010300436 -0.0002107081 -0.0008107556 -0.0000042637 0.0000906234 0.0008898278 0.0436583681 -0.0618709013 0.0358371205 -0.0383434899 0.0777043752 0.0275520246 -0.0014219903 0.0532001076 0.0211296436 0.0310861867 -0.0386822960 0.0232422971 -0.0115960335 -0.0034805669 -0.0477830154 -0.0406630676 -0.0128316534 -0.0680198262 0.0780857212 -0.2819413733 0.1949728300 0.1271421212 -0.2095341097 0.1529335711 0.0687124348 0.0617976837 -0.0288550660 0.0765299824 -0.1445569386 0.0392750388 0.0042829031 -0.1724254039 0.0443712040 -0.0296966461 -0.0271756429 -0.0346413163 -0.0085385102 -0.0272988934 -0.0217981911 0.0224259224 0.0102359472 -0.0073168797 -0.0055328292 0.0040736837 0.0324871450 -0.0232742983 0.0141500591 0.0468725425 0.0206788733 0.0983872869 -0.0741892988 0.0772172550 0.0707421606 -0.0676725539 0.0469648263 -0.0474824188 0.0165577319 0.0602793846 0.0756044841 -0.0083094066 0.0135741378 0.1050239274 -0.0154636969 -0.0303364543 -0.0290297950 -0.0804482160 -0.0030264129 -0.0015714177 0.0894285142 -0.0137295507 0.0293573262 0.0618064722 -0.0093800266 -0.0061297391 -0.0687240028 -0.0000418981 -0.0055606749 0.0659367441 -0.0284437152 0.0308263690 -0.0574151135 -0.0116268326 0.0128933948 -0.0612531222 0.0282746617 -0.0396420543 -0.0487431118 0.1387162910 -0.0186246644 0.2512167730 0.1497239868 -0.0328448867 0.1160639276 0.0419393722 0.0479660641 0.0430175383 -0.0072209669 -0.0141567828 0.0483073513 -0.0930765690 0.0662804309 -0.2510612879 -0.1686426273 0.0181347648 -0.2184534845 -0.0287149389 -0.0157978586 0.0493319458 -0.0005880825 0.0027167112 -0.0451697315 0.0184342755 -0.0456672053 -0.0357664158 -0.0014674939 0.0155803611 -0.0444280641 -0.0905461120 -0.0305357802 0.2027101047 -0.1502304361 0.0301214280 0.2037850420 -0.0142976695 -0.0137694566 0.0479045303 0.0321447227 0.0224219058 0.0363293169 0.1073656722 -0.0221029971 -0.2191987795 0.1047131463 -0.0044949705 -0.0715258636 -0.0013860394 -0.0014698154 -0.0018341350 -0.0033254909 -0.0005857865 -0.0055573696 0.0020849298 0.0039394464 0.0018000051 -0.0024748429 -0.0004139797 -0.0046995060 0.0004764324 0.0009572674 0.0003927149 0.0075199444 -0.0013972825 -0.0031763927 0.0017727885 0.0007785210 -0.0001642458 -0.0039734552 -0.0037394008 0.0019101959 0.0065865313 0.0106178463 -0.0096651831 -0.0225561761 -0.0291972467 0.0623398043 -0.0236867433 -0.0262801228 -0.0023920324 0.0057513543 0.0118623281 -0.0143870680 0.0159441090 0.0195312812 0.0084459393 0.0086756257 -0.0248293604 -0.0066906122 0.0023908959 -0.0142024828 0.0148548937 -0.0061336515 0.0305388469 0.0015093617 0.0072056288 -0.0119163471 0.0083162107 -0.0138173788 0.0342977527 -0.0303465999 -0.0149859640 -0.0020531127 0.0030452515 -0.0119779937 0.0047942919 -0.0055369093 0.0020707142 -0.0012914624 -0.0000914195 0.0019571236 -0.0043970540 -0.0024903362 0.0013807177 0.0052353013 0.0017513857 0.0591164410 0.0113065550 0.2735044626 0.1426213899 -0.0748724494 0.0918372239 -0.0097837786 0.0352048721 0.0191758502 -0.0686058011 0.0968708796 -0.0077941666 -0.0198381982 0.0606467141 -0.0899466969 -0.0189032351 -0.0959558747 0.0010394974 -0.0004477717 -0.0702414393 0.0254551359 0.0670117239 -0.0584599217 0.0205110572 0.3012011404 -0.2908041880 0.0778381941 -0.2476462782 0.0962336672 -0.2451185522 -0.2346072235 0.0415945203 -0.1142894835 0.0789055779 0.0791530652 0.0979660215 -0.1035710912 -0.1006740578 -0.1394890314 0.0239498402 -0.2137777878 -0.3384165912 -0.0041671188 -0.0342978596 -0.0515971977 -0.0237144811 -0.0013773264 -0.0461603839 0.0053269006 -0.0095645721 0.0261291212 0.0740256610 0.0378075560 0.0154360171 0.0809013892 0.0736695586 0.0578359931 -0.0642930155 -0.0214371691 0.0536404821 -0.0695433632 0.0938408062 -0.0128707413 0.0392288429 0.1476186805 0.0304599786 0.0460021372 0.0461207543 0.1995057522 0.0031764789 -0.0536925981 0.1153005123 0.0191995303 -0.1396165919 -0.0092154210 -0.0137423125 0.0111476568 -0.0078120894 0.0279687691 -0.0201894423 -0.0095725394 0.0116089466 0.0123289684 -0.0070777215 -0.0000980895 0.0004497422 0.0019667888 -0.0063637196 0.0050987008 0.0010533124 0.0016279900 -0.0031181680 -0.0000734635 -0.0038225208 0.0007857319 -0.0036818068 0.0032080627 -0.0003265755 0.0015242811 0.0020070868 -0.0004994515 0.0030734289 0.0030825676 -0.0003334849 0.0034609345 0.0017298282 0.0003481259 0.0018289102 0.0018511027 -0.0007811192 -0.0024988640 -0.0034479519 -0.0011917974 -0.0050863180 -0.0052389976 -0.0001076805 0.0022602690 -0.0012872258 -0.0056653863 0.0140866650 0.0001921336 0.0015479803 -0.0016797373 0.0103629596 0.0013533204 0.0036587498 0.0063515727 -0.0015468868 -0.0034885259 -0.0068978397 0.0034485540 -0.0031762030 0.0108817930 -0.0060960725 -0.0157605064 -0.0131552067 0.0036084671 0.0049042804 0.0027605505 -0.0008286211 -0.0048096520 0.0029215873 -0.0002610900 -0.0029080927 0.0013941809 0.0000347408 -0.0034648815 0.0149706418 -0.0195610569 0.0114501490 -0.0076242954 0.0125352088 -0.0152365270 -0.0066197345 0.0013275399 -0.0084169020 0.0073853808 -0.0088059427 0.0057859564 -0.0053895612 0.0082848993 0.0047062548 -0.0046490911 0.0103663503 -0.0027964045 0.0390394293 -0.0878475108 0.0357140283 0.0107727125 -0.0670464126 0.0376745515 -0.0046144296 0.0075927106 -0.0018898833 0.0108131123 -0.0460332259 0.0317348877 0.0203572135 -0.0369450882 0.0230156410 0.0004157518 -0.0001397848 0.0208902642 -0.0056639777 0.0044456692 0.0156642254 0.0037061850 0.0073431338 -0.0041528361 -0.0068860585 -0.0089192817 -0.0128818897 -0.0018355850 -0.0150741894 -0.0103146600 0.0333558211 0.0275830753 0.0032061835 0.0126215093 0.0463370959 -0.0109840330 -0.0209714875 0.0036457521 -0.0016716336 0.0140080882 0.0340256158 -0.0301216001 0.0303468618 0.0128249436 -0.0215790315 0.0016230741 -0.0013798532 0.0008139644 -0.0010081744 -0.0024766381 -0.0010401406 0.0059970365 -0.0064185099 -0.0191444492 0.0034824481 0.0050686027 0.0205466736 -0.0068973038 -0.0026883021 0.0133536712 0.0046415823 0.0115831450 -0.0010431647 0.0037236702 0.0123650051 -0.0075820284 0.0132078302 -0.0151387468 -0.0141519229 0.0088104855 0.0112762075 0.0242028759 0.0378916085 -0.0094211893 0.0128775877 0.0074825539 0.0230622314 0.0024787253 -0.0158383839 -0.0086796201 0.0109450670 0.0167724436 0.0197920468 -0.0366268568 -0.0227200952 -0.0070703708 -0.0006722685 0.0034215496 -0.0102616319 -0.0016889833 -0.0055007933 0.0039368304 -0.0064080028 -0.0020544984 -0.0182179317 -0.0006264559 -0.0114969745 0.0123189538 -0.0083090744 0.0131169704 -0.0197151160 0.0197974775 -0.0119049394 0.0122486808 -0.0076279533 -0.0000500108 -0.0126049880 0.0029590700 0.0133959211 0.0071782779 0.0097955006 -0.0028849368 -0.0120212633 -0.0123882507 0.0242837077 -0.0015253748 -0.0021918482 0.0035124724 0.0104666096 0.0039939003 0.0288961748 -0.0056570013 0.0431864389 -0.0286792312 -0.0529110108 -0.0427191870 0.0222688717 -0.0051373293 0.0477591927 0.0039557685 0.0033250548 0.0016690982 -0.0239109127 -0.0052457460 -0.0007332164 0.0240276452 0.0140064382 -0.0156649500 -0.0037213207 0.0010186661 -0.0107506292 0.0556913364 0.0460737785 -0.0458267342 -0.0850759465 -0.1396027598 0.2012792630 -0.0735663554 -0.1324168803 -0.0120060974 0.0217309174 0.0595074159 -0.0704087980 0.0713173932 0.1044146761 0.0393499903 0.0300146584 -0.1213580036 -0.0395743080 -0.0032556729 -0.0656381633 0.0714092155 -0.0181087064 0.1469661338 0.0123634951 0.0452216156 -0.0628005487 0.0422173882 -0.0535592271 0.1651697060 -0.1467326401 -0.0843573884 -0.0183986961 0.0272227439 -0.0745990893 0.0389825809 -0.0333604707 0.0309231004 -0.0011272489 0.0033302479 0.0159584973 -0.0260873698 -0.0183779831 0.0188234620 0.0224461516 0.0200923848 -0.0163294804 -0.0237258010 -0.0718757317 -0.0502536015 0.0365855236 -0.0304325228 0.0046172333 -0.0080201144 -0.0008142275 0.0256749767 -0.0343401014 0.0033882200 0.0125607379 -0.0223231847 0.0324962491 0.0009010320 0.0320436985 -0.0025242652 0.0010688077 0.0250892391 -0.0124092621 -0.0262661033 0.0202474273 -0.0100258820 -0.1213309886 0.1173686894 -0.0394515013 0.1045931475 -0.0544590490 0.0904109314 0.0889016198 -0.0130387001 0.0404388810 -0.0296167924 -0.0252586262 -0.0328727429 0.0324646889 0.0332606338 0.0467657914 -0.0187143056 0.0910919064 0.1014010209 0.0021247826 0.0085064656 0.0185365464 0.0102914154 -0.0015915020 0.0179889338 -0.0082905432 0.0061520787 -0.0109157584 -0.0232042231 -0.0110505719 -0.0057926851 -0.0241871224 -0.0297660731 -0.0173625128 0.0204425425 0.0111962232 -0.0201206797 0.0450631197 -0.0688160420 0.0145484912 -0.0119662080 -0.0348809588 -0.0066111295 -0.0356044680 0.0152279373 -0.0772421001 0.0181447865 -0.0038864579 -0.0324457698 -0.0207835825 0.0634168270 0.0014053842 0.0010500562 -0.0071302208 -0.0028655624 0.0214092632 -0.0243075992 0.0036134334 0.0543342642 0.0481682426 -0.0283967314 0.0019478761 -0.0019164971 -0.0037710100 0.0050368174 -0.0017481647 -0.0052690232 -0.0017740568 -0.0029027617 0.0015164912 -0.0022784209 0.0083925831 -0.0050511492 0.0019989387 -0.0067645698 0.0007816238 -0.0005813787 -0.0064243084 0.0052485952 0.0022870932 -0.0062081328 0.0050457236 -0.0003999153 0.0004386795 0.0003791686 -0.0015679905 0.0009043479 0.0022637055 0.0014705963 0.0068890537 -0.0051410682 -0.0018600591 -0.0081923076 0.0336766303 -0.0037677075 0.0109287640 0.0045535903 0.0111688887 0.0182158137 -0.0072088562 0.0356052838 0.0140612827 0.0122995710 -0.0235826890 0.0016246227 -0.0169850915 0.0091543037 -0.0017079709 -0.0205317437 0.0120584271 0.0030235969 -0.0186665213 -0.0229490149 0.0173907380 0.0171345151 -0.0053605335 0.0003466108 0.0045502815 -0.0059475472 0.0005332000 0.0047228207 -0.0004747268 -0.0009734472 -0.0009821342 0.0430691818 -0.0606420538 0.0350023843 -0.0075683805 -0.0031985957 -0.0949513966 -0.0374050211 -0.0177168571 -0.0692497940 0.0144478726 -0.0380121068 0.0244874597 -0.0224276986 0.0531689320 0.0557203882 0.0083536218 0.0658747935 0.0390540283 0.1238578750 -0.2095385087 0.0197936375 0.0077900641 -0.2335506346 0.0812665046 -0.0830593453 0.0146852587 0.0119352581 0.0147140209 -0.1508406524 0.1505459721 0.1118434077 -0.0697921465 0.0924203230 0.0028549124 0.0046760405 0.0960951174 -0.0286402568 0.0277790976 0.0760112967 0.0165625327 0.0288951509 -0.0165975808 -0.0347931299 -0.0390146771 -0.0670807779 -0.0074932837 -0.0660648840 -0.0527111715 0.1391275400 0.1150843038 0.0244593759 0.0383049395 0.2065170693 -0.0428472203 -0.0918973138 0.0184093467 -0.0084276668 0.0416772712 0.1459279208 -0.1347818589 0.1221547851 0.0411305364 -0.0950995273 0.0369279516 0.0101853542 0.0712883744 -0.0027387007 -0.0186567267 -0.0823159514 0.0260823235 -0.0292044309 -0.0856799486 0.0151487137 0.0223607341 0.0921789274 -0.0290520960 -0.0115876652 0.0334142636 0.0267979378 0.0422222254 0.0087298404 0.0163992168 0.0536361512 -0.0158371899 0.0442557230 -0.0506842652 -0.0448842310 0.0080797827 0.0558690247 0.0547742335 0.1108792775 -0.0321551499 0.0243185097 0.0220038171 0.0847372217 0.0004115655 -0.0634886247 -0.0357413928 0.0368535351 0.0896411194 0.0669546388 -0.1037055934 -0.0615937727 -0.0424452760 0.0345941918 0.0147282041 -0.0470945163 -0.0168348164 -0.0247919542 0.0206064689 -0.0232092396 -0.0081904935 -0.0818956852 0.0027201028 -0.0463648750 0.0523471600 -0.0309593180 0.0720977351 -0.0906964854 0.0774816616 -0.0302138702 0.0594265063 -0.0456532727 0.0001671542 -0.0539235026 0.0083113644 0.0537291981 0.0301177231 0.0393273702 -0.0201672876 -0.0509325629 -0.0366309126 0.0948076290 -0.0012358111 -0.0074621404 0.0021236333 -0.0023585658 0.0016981637 -0.0087163978 0.0080484515 -0.0080219509 0.0107804832 0.0239619605 0.0233808504 -0.0101645393 0.0022756419 -0.0201916071 -0.0051847071 -0.0040514804 -0.0013035290 -0.0010135536 0.0039786716 0.0052713086 -0.0186129225 -0.0114535169 0.0101832296 0.0080295187 0.0058987894 0.0046913552 -0.0005389224 0.0021144860 -0.0070438979 -0.0411864228 0.0039214743 -0.0738920979 0.0029062719 -0.0082802194 0.0147648855 0.0085711173 -0.0090772523 0.0007811254 0.0008146530 0.0050464477 -0.0024371755 -0.0055692832 0.0060227654 0.0052262077 0.0028298052 -0.0063800041 -0.0216167190 -0.0656944435 -0.0066764068 0.1601453163 0.0291290872 0.0067511216 -0.0739192644 0.4044734601 0.0149029909 -0.7718538344 0.0023813825 -0.0002830569 0.0023247612 -0.0067163804 0.0043834953 0.0011692923 0.0006002324 -0.0007632930 0.0007726830 0.0011727507 -0.0013780307 -0.0005399029 0.0000206559 0.0004891456 0.0007957125 -0.0000054310 -0.0001879348 0.0002463533 0.0003169921 0.0000517177 0.0001880434 -0.0000210144 0.0001458973 0.0001198568 -0.0000149953 0.0000367822 -0.0000230611 -0.0000477048 0.0001405395 -0.0000075539 0.0000414039 -0.0001838489 0.0000113594 -0.0000075812 0.0001011037 -0.0001454788 0.0000148750 -0.0001546382 -0.0000040645 0.0004529842 -0.0003220749 0.0002917261 -0.0005550430 0.0003134813 -0.0004565944 0.0002460329 0.0001742053 0.0000501663 0.0000122924 -0.0000039912 0.0000199701 -0.0000111525 -0.0000014624 0.0000364975 -0.0000291590 0.0000848255 -0.0000720156 0.0000044579 -0.0000541269 -0.0000019807 0.0000363194 -0.0000225237 0.0000893676 -0.0001113717 -0.0000131985 -0.0000494111 0.0000273346 0.0000454781 -0.0000468523 -0.0000656242 -0.0000486952 -0.0000102668 0.0000491083 0.0000337924 -0.0000419614 0.0001859370 -0.0004995718 0.0001779400 0.0004505005 0.0000101347 0.0003484863 0.0000139596 -0.0000912103 -0.0000982068 0.0001219023 -0.0000296217 0.0000110788 -0.0000685704 0.0002360734 0.0000276327 -0.0000893298 -0.0000155056 -0.0001548525 0.0007117025 -0.0010783867 0.0000608009 -0.0217372246 -0.0327297806 0.0122249585 -0.0000922595 0.0000599021 0.0002240705 -0.0001195045 -0.0000048731 0.0001243577 0.0000292331 0.0001258842 -0.0001049318 -0.0001933372 -0.0005783492 0.0000995799 0.0001924888 0.0003649063 -0.0000186853 0.0000962408 0.0010165953 -0.0000762619 0.0002391575 0.0003688289 -0.0000023370 0.0000182845 0.0000255847 0.0000128818 0.0000676706 -0.0000314727 -0.0000911455 -0.0005122699 0.0003315211 -0.0008411269 -0.0003369645 0.0004881978 -0.0017721674 -0.0000381057 -0.0016914689 0.0014972478 -0.0024505523 -0.0022235594 -0.0004088795 -0.0013654666 -0.0016165519 -0.0009318202 0.0041546982 -0.0005537954 0.0015169042 -0.0012558240 0.0004368715 0.0010970532 0.0004074998 -0.0009611007 -0.0004373012 0.0001897624 -0.0008336156 -0.0006751645 0.0001206600 -0.0000221503 -0.0000878633 0.0001365056 -0.0000690751 -0.0001357200 0.0000612550 -0.0000139974 -0.0000572814 0.0026567344 -0.0042859108 0.0020665814 -0.0004473887 0.0015899932 -0.0012171007 -0.0002811703 0.0011737497 -0.0017150682 0.0010840398 -0.0017100767 0.0007014853 -0.0017392245 0.0018629898 0.0007057223 -0.0003968194 0.0016806223 0.0006132264 0.0025101431 -0.0087382370 0.0032191145 0.0059712949 -0.0126431317 0.0053401075 -0.0010914344 0.0014235109 -0.0001145471 0.0009368698 -0.0118951405 0.0069285533 0.0015433182 -0.0018248271 0.0025705139 0.0039480474 0.0133087549 0.0026478724 -0.0007416841 0.0187122883 -0.0045994342 -0.0090451569 -0.0118739319 0.0029547500 0.0140639354 0.0076503718 -0.0015868581 0.0072655365 0.0111045688 0.0039712266 -0.0178887014 -0.0319334217 0.0177718907 -0.0889550299 -0.0721136728 0.0303063930 0.0079693008 0.0092497245 -0.0023089996 -0.0329612320 -0.0952505168 0.0356741473 -0.0162454417 -0.0190854150 0.0205459385 0.0003766653 -0.0002024720 0.0006047310 -0.0000892398 -0.0004655930 -0.0005961403 -0.0013742873 -0.0017131929 0.0025479826 -0.0014652582 -0.0024167103 -0.0004240681 -0.0052377330 0.0020275493 -0.0052091529 0.0061688359 -0.0036754499 -0.0028305441 0.0024573294 0.0116462495 0.0014785252 0.0068860618 -0.0063766062 -0.0005507388 -0.0052258109 0.0137762280 0.0083511037 -0.0097371210 -0.0047451199 -0.0271324852 -0.0015748215 0.0078203205 -0.0028702557 -0.0083554832 -0.0044781157 0.0058836668 0.0079308237 0.0061056737 0.0090707000 -0.0114554764 -0.0031063830 0.0015420345 -0.0351285934 0.0002934303 0.0379263592 0.0487498761 -0.0029838963 -0.0911300678 0.0245801897 0.0039295265 -0.0368219874 0.0139604553 -0.0111941285 0.0015289125 -0.1155939827 0.0219009103 0.1519787738 -0.0261628149 -0.0061200951 0.0704740822 -0.0166953911 0.0130640487 0.0326895682 -0.0250000983 0.0028674954 0.0309876075 0.0393345396 0.0086939920 -0.0579389964 0.1434845295 -0.0076061568 -0.2732891580 -0.0002363287 -0.0000936684 -0.0000912699 -0.0002365345 -0.0004978759 -0.0008443497 0.0001521537 -0.0001489975 -0.0003407935 0.0002550480 0.0001478990 0.0002624510 0.0002348470 0.0001470852 0.0000521556 -0.0003165012 -0.0001331363 -0.0001238083 0.0007052861 0.0003558327 -0.0003352157 -0.0000861561 -0.0001678211 0.0000007117 0.0304763603 -0.0136881280 0.0747821467 0.3932773271 -0.1063051311 0.7698011008 -0.0611572880 0.0215072056 -0.1592437615 0.0051551028 0.0012518851 0.0222694912 -0.0083257396 -0.0036671939 -0.0068440736 -0.0024079048 -0.0018975289 0.0034248035 0.0097273967 0.0039182087 -0.0057158651 -0.0062717719 0.0035078728 0.0150355244 0.0036246601 0.0005109421 -0.0072964542 0.0364505905 0.0053981629 -0.0670404318 -0.0052837085 -0.0017369530 -0.0009857400 0.0014647024 0.0004317087 -0.0014325390 0.0006008602 0.0003706765 -0.0004952915 0.0002286099 -0.0006215091 -0.0007192392 0.0013141611 0.0008710841 0.0009167250 -0.0004177066 0.0017823993 -0.0022340728 -0.0012579958 -0.0001763319 -0.0001021509 0.0000823844 -0.0002328703 -0.0001195888 0.0001463205 -0.0002136845 0.0001139953 0.0009501850 -0.0013656840 0.0008256897 -0.0009609267 0.0019494584 -0.0005597029 0.0011850969 -0.0012528224 0.0009615662 -0.0006844292 0.0007127713 -0.0002925667 -0.0072823910 0.0058045237 -0.0040469006 0.0079912302 -0.0054197449 0.0051211373 -0.0046905910 0.0011029799 -0.0026938352 -0.0001891538 -0.0004337803 -0.0003061600 0.0000414078 0.0003386934 0.0001824426 -0.0000838532 -0.0002310233 0.0016395315 0.0002904800 -0.0002736964 0.0002577996 0.0001645013 -0.0001001245 0.0005293329 -0.0005703500 0.0002694807 -0.0002671859 -0.0002662305 0.0004649815 -0.0003966327 -0.0002903583 0.0001397443 -0.0001880072 0.0003788976 -0.0004003804 -0.0000494338 0.0005518103 -0.0012762446 0.0002085314 0.0017762206 -0.0025614861 0.0001117678 0.0013812259 -0.0019364835 -0.0001194857 -0.0016468599 0.0021309377 -0.0008808322 -0.0011595977 0.0017369646 0.0001032958 0.0004848854 -0.0000916319 0.0000477632 -0.0041773318 0.0034565695 0.0001971858 -0.0016764559 -0.0029557788 0.0010338795 -0.0000527819 0.0000209803 0.0000415220 -0.0001440759 -0.0000505452 0.0000339349 -0.0000401824 -0.0001417609 -0.0000874562 -0.0000137598 -0.0000096780 0.0000225471 0.0000281359 0.0000171046 -0.0000060686 0.0000185523 0.0000845634 -0.0000247250 0.0000180302 0.0000340661 -0.0000022128 0.0000755988 0.0001034752 0.0000665392 0.0001014644 -0.0000248597 -0.0000786217 -0.0000587553 0.0001206300 -0.0001600110 -0.0001088722 0.0000316164 -0.0000133381 -0.0000071256 -0.0001421316 0.0001515051 -0.0001588691 -0.0002204209 0.0000425268 -0.0002605101 -0.0001501667 -0.0001008845 0.0002573505 -0.0000143771 0.0001262151 -0.0001144957 0.0000389080 0.0001079758 0.0000318927 -0.0000934429 -0.0000331260 0.0000369276 -0.0000830650 -0.0000698803 0.0000472895 -0.0000423930 -0.0000919609 -0.0000332617 -0.0000374942 -0.0000106853 0.0001743626 -0.0001066682 -0.0002458016 -0.0148794290 0.0405824799 -0.0189536758 0.0026214211 -0.0197976725 0.0028333616 -0.0067048082 -0.0185429197 0.0065552318 -0.0071240513 0.0157092010 -0.0057627399 0.0125203131 -0.0125961816 0.0042435671 0.0033934534 -0.0118507647 -0.0028057639 -0.0231246942 0.0712556820 -0.0371866446 -0.0743033873 0.1026935359 -0.0451689359 0.0064192168 -0.0135084828 0.0017802023 -0.0153267045 0.1093215020 -0.0520947007 -0.0099091888 0.0120076464 -0.0150661000 0.0003396015 0.0012633886 0.0004602380 -0.0002142406 0.0019018141 -0.0001176452 -0.0006961894 -0.0010950782 0.0002453240 0.0011742608 0.0006336289 -0.0004637452 0.0006019201 0.0008638664 0.0003211028 -0.0013310541 -0.0024335777 0.0016676482 -0.0082951754 -0.0059514754 0.0026790682 0.0005721903 0.0008688603 -0.0002247808 -0.0032445020 -0.0085925242 0.0029634477 -0.0011922275 -0.0014534491 0.0015695201 -0.0019042505 0.0025711258 -0.0022548838 0.0002977837 0.0035499664 0.0013777992 -0.0000942857 -0.0001886863 0.0001073651 -0.0001237226 -0.0001750136 0.0000971640 0.0497864609 -0.0089524106 0.0848511388 -0.0305489826 0.0077371952 -0.0368275289 -0.0175250721 -0.0052079974 -0.0251126030 -0.0262155352 0.0060335159 -0.0302803792 0.0136144461 -0.0114658547 0.0283845773 0.1401500601 -0.0317712426 0.2722121475 0.0213570320 -0.0116919829 0.0370622545 0.0125048706 0.0051760103 -0.0056220280 -0.1179849392 0.0109663037 -0.1487364309 -0.0083482258 0.0080452826 -0.0412844980 -0.0008450594 0.0016191134 0.0093909602 0.0042321441 -0.0011073433 -0.0106097959 0.0014524384 -0.0037097240 -0.0045619935 -0.0029903410 0.0032895275 -0.0032718719 -0.0138798276 -0.0014439485 0.0178648140 -0.0099878952 0.0033718375 0.0074621005 -0.0035204028 -0.0065201610 0.0034629110 0.0016702874 0.0027921028 0.0048890267 -0.0020443391 -0.0067007622 -0.0123775055 0.0166717581 0.0033301380 -0.0239050276 -0.0000619342 0.0000572727 -0.0000449705 0.0001113911 -0.0001460012 0.0000072621 -0.0001249676 -0.0001382964 -0.0002056974 0.0000932507 -0.0000036402 0.0002098905 -0.0000232585 0.0001978185 -0.0000022447 0.0008038127 -0.0000481308 -0.0004034131 0.0005955252 -0.0002340712 -0.0000978890 -0.0006673309 -0.0005528220 0.0002281896 0.0030324109 0.0015558513 -0.0003003619 -0.0010459301 -0.0024246864 0.0050576866 -0.0007142178 -0.0022704007 -0.0012341352 0.0007058569 -0.0005871923 0.0010049389 -0.0000001971 0.0028229572 -0.0005947261 -0.0012050619 -0.0000532915 -0.0012076427 -0.0038316848 -0.0018507704 -0.0009882498 0.0007570590 0.0003344992 0.0001272538 0.0007158309 -0.0009138464 0.0005780213 -0.0011845334 0.0005282868 -0.0000561844 -0.0006654884 -0.0006867689 0.0024530659 -0.0009459003 -0.0000620949 0.0002900988 0.0035893086 0.0012617651 -0.0020317856 0.0004945429 -0.0015415646 0.0006948061 0.0000792230 0.0003589130 0.0024394824 0.0003957626 -0.0117443119 -0.0272988112 0.0026571868 -0.0087637383 0.0013973628 -0.0015604302 -0.0019030815 -0.0039510261 0.0028833895 -0.0119845062 -0.0096727448 -0.0055279527 -0.0039165798 0.0120882396 0.0074059396 0.0141895119 0.0017587174 0.0054370906 0.0029284511 0.0003114614 -0.0022229331 0.0030903066 0.0002354926 -0.0165891430 0.0153115015 0.0089621568 0.0150599233 0.0078146102 0.0226453372 -0.0044622432 0.0184318029 -0.0040191765 -0.0064925050 -0.0103949829 -0.0161494689 0.0194254751 -0.0010254399 0.0180743876 0.0058192262 0.0214468265 0.0225639162 -0.0402391245 0.0587583303 -0.0104206010 -0.0436863293 0.0689735184 -0.0108228527 0.0592939038 -0.0957363620 0.0204996993 0.0375801508 -0.0635122850 0.0148343238 0.0123353321 -0.0357535174 0.0008100248 -0.0261692835 0.0473413410 -0.0127556463 -0.3486838407 0.4667785309 -0.1347789266 -0.2675754029 0.3714019626 -0.0815870141 -0.1253122320 0.1749772777 -0.0709059978 0.1787619204 -0.2326545478 0.0562780472 0.2747898197 -0.3839809572 0.0970361394 0.0003064353 -0.0015809594 -0.0001174553 -0.0113056038 0.0143915845 -0.0004817502 0.0005648757 -0.0004376574 0.0002039505 0.0045640196 -0.0015068537 -0.0058680337 0.0132381716 0.0017987232 -0.0030533928 0.0028944476 0.0142858105 0.0077818528 0.0030475993 -0.0030542639 -0.0000977102 -0.0027979917 -0.0001035829 0.0003149960 -0.0032280894 0.0000914074 0.0007111465 -0.0022218717 -0.0007609863 -0.0005109585 -0.0052113183 -0.0094341978 -0.0081272690 -0.0097485427 0.0017014192 0.0082690339 0.0030577445 -0.0024697984 0.0076540683 0.0056807207 -0.0005071747 -0.0021359898 0.0014885574 0.0033696832 -0.0105861863 -0.0088972383 0.0004410720 -0.0077622218 -0.0031465178 0.0025500909 0.0011723411 0.0128818509 -0.0050472828 -0.0045779807 0.0039589559 -0.0019622818 -0.0008989155 -0.0057320090 0.0053616573 0.0075832483 0.0013255583 0.0022481696 0.0016756991 -0.0012927665 0.0040388709 0.0082900134 0.0016021052 0.0073201188 0.0032507299 -0.0168544166 0.0103662111 0.0230019261 0.0007553078 0.0007088866 -0.0000976209 -0.0001028951 -0.0015994531 -0.0010970926 -0.0012690905 -0.0002626621 -0.0004117677 0.0015048259 -0.0006696423 0.0007231174 -0.0021248785 0.0027897624 -0.0007405249 0.0001840528 -0.0009998723 0.0019102220 -0.0019940788 0.0013291984 -0.0030335633 -0.0062135740 -0.0003747869 0.0039848174 0.0004283462 0.0002561236 -0.0013863992 0.0018294421 -0.0149600562 0.0070809019 -0.0049863470 0.0070030945 -0.0014901336 0.0000235886 0.0003206711 -0.0001199794 -0.0004816326 0.0003425257 0.0006380132 0.0002613281 -0.0000828278 0.0000170924 -0.0003978596 -0.0000115785 -0.0007575693 -0.0000438199 0.0000504812 -0.0001619960 -0.0009232584 -0.0008320793 0.0005035312 -0.0002208613 0.0012422913 0.0000513563 0.0000413961 -0.0001684819 0.0000453998 -0.0013521652 0.0001638793 -0.0003172507 -0.0006796441 -0.0006511638 0.0000642331 -0.0006260348 -0.0001451045 -0.0014430819 0.0002583764 0.0008010216 0.0021387153 -0.0000377303 0.0000738019 0.0002323522 -0.0000437237 0.0000219237 -0.0002373952 0.0002127627 -0.0005256940 0.0008571935 0.0000403702 0.0000803530 -0.0008795872 -0.0001381501 0.0016152511 -0.0002621689 0.0001716242 -0.0003465810 -0.0003639821 0.0001773484 0.0016258623 0.0018160739 0.0006785038 -0.0009345727 0.0013784300 0.0004171941 0.0010835843 0.0001456170 -0.0007199235 -0.0007505161 0.0007325605 0.0010789062 0.0008913656 -0.0013463941 -0.0018451221 -0.0014630278 -0.0017297284 -0.0025617614 -0.0011501733 -0.0018790684 -0.0000700486 0.0004604469 0.0003665120 0.0006670491 0.0002306408 0.0005154246 0.0023775853 -0.0018521406 0.0015864153 0.0010504803 0.0000311852 0.0004572784 0.0036417276 -0.0005887557 0.0015324276 0.0006682457 0.0029023132 0.0000106957 -0.0010843643 -0.0002863371 -0.0005965646 0.0020283848 0.0028519525 0.0018608754 -0.0012915239 0.0004138242 -0.0006513291 0.0070298086 -0.0034701603 0.0017182452 -0.0054079605 0.0180980805 0.0084569474 0.0044522907 0.0234308917 0.0298439244 -0.0181665022 -0.0050952054 -0.0302479232 -0.0030766567 -0.0126877288 0.0003262010 -0.0342329364 0.0093304397 0.0277849712 -0.0382501953 0.0025526436 0.0101270118 0.0276797570 0.0257764172 -0.0118521526 -0.0966875963 -0.0668558180 0.0144054004 0.0920818174 0.0866747894 -0.1720838559 0.0567281512 0.0888673597 0.0232766497 -0.1166447009 0.1850263136 0.0166585628 -0.0447059733 -0.0840528403 0.0292880316 0.0108004431 -0.0977231426 0.0271316833 0.1656204925 0.1356701275 0.0185801349 -0.0267194507 0.1053732648 0.0325009383 0.0767203640 -0.0984492546 0.0094982307 -0.0602398712 0.1242870256 -0.1883081030 -0.1141905279 -0.0254097913 -0.0160365643 0.1011700237 -0.0595382772 -0.0147153409 0.0044408236 0.0220210371 -0.0223866980 -0.0038094689 0.0035634923 -0.0048377668 0.0067466438 0.0038752277 -0.0033561515 0.0011175007 -0.0088806420 0.0057350703 -0.0060807593 0.0056463064 -0.0053291010 0.0013909440 -0.0016128731 -0.0003832290 0.0012095178 -0.0016165223 -0.0006156830 -0.0033383560 0.0019479767 -0.0003886898 0.0031577243 -0.0011312252 0.0014222647 -0.0031978142 0.0029412706 -0.0013812569 0.0011720041 -0.0005176295 0.0008960849 0.0129065711 -0.0103757839 0.0098741881 -0.0139429581 0.0129834405 -0.0069100656 0.0188970902 -0.0109043742 0.0114939271 -0.0018293880 0.0003633478 -0.0019435120 0.0010519617 -0.0003705065 0.0013966366 -0.0054368713 0.0155224019 -0.0079072471 -0.0017088320 0.0024266461 -0.0001130762 -0.0016116787 0.0029119986 0.0009337541 0.0013182647 -0.0046579101 0.0004771553 0.0018131293 -0.0008310953 -0.0005434182 0.0005713975 -0.0027382731 0.0002531389 -0.0006490826 0.0026023561 -0.0009961670 -0.0152298272 0.0177698677 -0.0051321427 -0.0068370941 0.0123973100 -0.0030262155 -0.0093848107 0.0118798219 -0.0037511065 0.0091675554 -0.0107755964 0.0023451328 0.0095894363 -0.0135437733 0.0048471553 -0.0002932366 -0.0004632312 -0.0003563348 -0.0079515257 0.0091622445 -0.0004177559 0.0670359171 -0.0221987709 0.0021279366 0.0013534054 -0.0010635120 -0.0026375882 0.0035639187 0.0014860829 -0.0006979023 0.0014211424 0.0045093705 0.0026833643 -0.0003015709 -0.0005339337 -0.0000094999 0.0001747397 -0.0002866703 -0.0001150098 0.0005184082 -0.0006351058 -0.0002386249 -0.0002598559 -0.0006147694 -0.0001105524 -0.0017102033 -0.0034908122 -0.0030132886 -0.0034465697 0.0006504917 0.0031435150 0.0000331775 0.0002962238 -0.0004364868 0.0000940265 -0.0003827639 0.0008690058 -0.0003471155 0.0006257278 0.0004735606 0.0033210972 0.0023748224 0.0012337910 -0.0020995706 0.0017203803 0.0004999699 -0.0007986855 -0.0003738272 -0.0010123380 0.0017458399 -0.0007643992 -0.0015004737 -0.0006630222 0.0011845776 0.0008213090 -0.0001315917 0.0007940969 0.0007091690 0.0006736758 0.0016513800 0.0020151759 0.0009781826 0.0018413984 0.0007769375 -0.0060314199 0.0039168590 0.0090047431 -0.0650414166 -0.0047609225 0.0055315154 0.0077669793 0.0166215549 0.0269278255 0.0489911349 0.0381584362 0.0476283101 -0.0138465278 0.0013603258 -0.0018617507 0.0293569661 -0.0284803468 -0.0584591007 0.0018012290 -0.0106369211 -0.0162916274 0.0154570512 0.0382214205 0.0290097370 0.0730113368 0.0871222227 -0.0125007039 0.0100917288 -0.0008233611 -0.0014884850 0.0412365583 0.0370679748 -0.0803475390 0.0036386286 -0.0119428625 -0.0234686928 -0.0029329645 0.0153831212 0.0292119942 -0.0386920543 0.0485483620 0.0564926468 0.0143497967 -0.0031234918 -0.0016172537 -0.0388225929 -0.0149633361 -0.0638799328 -0.0050888326 -0.0079772213 -0.0177194608 -0.0026801704 0.0337990156 0.0334236068 -0.0608490036 0.1078195493 -0.0037286781 -0.0115321253 0.0024822084 -0.0009978649 -0.0312125179 0.0581348927 -0.0806073421 -0.0099876132 -0.0090595089 -0.0257928478 -0.0049419102 -0.0018693613 -0.0102458757 0.0014134012 0.0027273845 0.0125389333 0.0034451851 -0.0043196521 -0.0122118537 0.0012782746 0.0037174861 0.0140098665 0.0074132212 0.0042412973 -0.0420058928 -0.0944902163 0.0883503229 0.0973803504 -0.0154549240 -0.2212819358 0.0099063783 -0.0636649066 0.0695268840 0.0457060008 0.0505748109 -0.2464329279 -0.1597295779 -0.0505990421 0.0925129626 0.0165407839 -0.0077411715 -0.1047714002 -0.0104510676 0.1545892460 0.0785287896 -0.1006375255 -0.0514663775 -0.0889590354 0.0159175085 0.2162293242 0.0629489225 -0.0112995657 0.1144508175 0.0496403246 0.0972253926 -0.0046867622 0.0090659866 -0.0458980440 -0.0248887187 -0.1042012739 -0.0126355153 -0.1194249089 0.1245813988 -0.0967203610 0.0177954401 -0.1037377630 0.0166376741 -0.1852150000 0.1310127929 0.0030128770 -0.0558748440 -0.2133983203 0.0065478320 0.0821459616 0.0459993895 0.0474844000 -0.1231935980 -0.2123432104 -0.1688374546 0.0816333197 0.0746360508 0.0083590567 0.0018940437 -0.0017895208 0.0029696513 -0.0049111126 0.0033619757 -0.0057892354 0.0080451610 0.0126302561 0.0143213449 -0.0019767481 0.0032237386 -0.0082757901 -0.0010552168 -0.0030891104 -0.0038523239 0.0021047899 0.0094706597 0.0075820954 -0.0243908869 -0.0074270949 0.0114800501 0.0141282857 0.0089480847 0.0023658385 -0.0006410715 -0.0008394505 0.0003938011 0.0028048150 -0.0010972198 0.0006873481 -0.0001904483 -0.0003932472 -0.0003756326 0.0025512928 -0.0026953541 -0.0020534819 0.0012832240 -0.0001288442 -0.0005272682 0.0015155464 0.0013477983 0.0002190237 0.0010886698 -0.0006115340 0.0018526986 0.0002513924 -0.0014109661 -0.0001799023 -0.0018860048 0.0028406567 -0.0005644662 0.0043680220 -0.0019880246 0.0026406895 -0.0012997973 -0.0002915957 -0.0005024526 -0.0022998431 0.0022388344 0.0014160697 0.0014573963 0.0011052090 0.0015619933 -0.0001158376 0.0005153392 -0.0004884903 -0.0018429182 -0.0050728785 -0.0031251512 -0.0167666740 0.0864969121 -0.0461463583 0.0003656101 0.0001973757 -0.0001848001 0.0002181504 0.0002171860 0.0000590653 -0.0001071575 0.0031385480 0.0028505862 0.0004470752 0.0024346832 -0.0066651669 -0.0012191281 -0.0061370500 0.0009080340 -0.0024447397 0.0005258250 -0.0015966945 0.0022696816 -0.0021987510 0.0017721285 0.0146042631 -0.0136597303 0.0003427713 -0.0163396932 0.0062128816 -0.0092499751 0.0117462733 -0.0088807951 0.0069776084 -0.0006181282 -0.0005568284 0.0079616457 -0.0044532951 -0.0036460613 -0.0081288853 -0.0167256698 0.0395992272 -0.0505074661 0.0025219158 -0.0066475481 -0.0032479808 0.0016298607 -0.0029196298 -0.0004360279 -0.0036216811 0.0031003008 -0.0004969460 0.0003347217 0.0067495098 -0.0010478877 0.0031883692 0.0022122504 0.0019753245 -0.0022904096 -0.0013552136 0.0036280963 0.0127962013 -0.0194224777 0.0053899624 0.0232511579 -0.0081796615 0.0156972337 0.0022791102 0.0007479103 0.0071052159 -0.0017147092 0.0017795747 0.0064247921 -0.0104044389 0.0163157470 -0.0049192182 0.0006664817 -0.0018822956 0.0014148789 -0.0653549654 0.0643189602 -0.0031462045 -0.0021899164 0.0010176297 -0.0002203479 -0.0159640568 -0.0291222680 -0.0334793700 0.0234009169 0.0167066186 -0.0006164110 0.0116496838 0.0333130299 0.0197075536 -0.0023047072 -0.0087909736 -0.0031650254 0.0005190616 0.0007127422 0.0016505522 0.0018536567 -0.0007175015 0.0013193316 -0.0003940853 -0.0013444620 0.0007632259 -0.0137797016 -0.0298675366 -0.0263989172 -0.0283184125 0.0049085056 0.0250155953 -0.0015298483 -0.0055701565 0.0038479742 0.0052921261 0.0008526924 -0.0157884036 0.0002129028 -0.0052446874 0.0052524147 0.0046388424 0.0016418615 0.0012192532 -0.0010954776 0.0028694481 0.0026471462 -0.0045278790 0.0011211838 0.0008251252 -0.0004307289 -0.0008223608 -0.0018169925 -0.0011712980 0.0022295707 0.0015544569 -0.0047900985 0.0028558238 0.0033324408 0.0118419745 0.0141796377 0.0115816547 0.0131903147 0.0147358146 0.0022861282 -0.0513442394 0.0345799906 0.0781887876 -0.0009377720 -0.0001799341 0.0000974883 0.0001666097 -0.0002673970 0.0003059733 0.0002175901 0.0008124663 -0.0000632829 -0.0002148531 -0.0001805065 0.0001088118 0.0005305169 -0.0003883530 -0.0002977810 0.0000778829 0.0000920802 -0.0001789923 -0.0000366461 0.0018066749 -0.0003286265 0.0027941615 -0.0027655933 0.0009689799 -0.0002046112 0.0001967974 0.0001180368 0.0005014447 0.0022319992 -0.0012502929 0.0004237311 -0.0002849179 -0.0001234023 0.0001581142 -0.0003511584 -0.0000194345 0.0011410500 -0.0016355454 -0.0021696893 -0.0005629675 -0.0001487897 0.0001506423 0.0010941328 0.0002858658 0.0024605818 0.0002483076 0.0001177348 -0.0001750949 0.0001509230 0.0002070897 -0.0002327087 0.0010511308 -0.0021815895 -0.0019509834 0.0002694770 0.0003374619 0.0002809883 0.0005708635 0.0004457174 0.0028486613 -0.0011157452 -0.0021462065 0.0013685395 0.0001544956 -0.0000034778 0.0003971332 -0.0001005842 -0.0002323633 -0.0004356782 -0.0001626613 0.0000996477 0.0001122234 -0.0000314752 -0.0003111395 -0.0003265634 0.0003449483 0.0003860704 0.0000531823 0.0024531810 -0.0022869677 -0.0016168985 0.0004051520 0.0033936908 0.0001881364 0.0006526917 -0.0005312785 -0.0006346336 -0.0017158090 0.0040437656 0.0009709153 0.0012615907 -0.0003439569 0.0002727020 -0.0004474145 0.0005337417 0.0004418188 -0.0030039883 -0.0011632878 0.0015698840 -0.0013656228 0.0005473671 -0.0001415261 -0.0030051365 -0.0002457072 0.0024938203 0.0013306493 0.0005652482 0.0002880627 0.0002807350 -0.0007455612 0.0005451561 -0.0002965654 0.0014687262 -0.0002697728 -0.0006850478 0.0001553607 -0.0001753660 -0.0018707570 0.0017342334 -0.0006522755 -0.0006647996 -0.0010899866 -0.0019947528 0.0001331302 0.0000189511 -0.0002185588 -0.0003909501 -0.0004319924 -0.0001187689 -0.0006140229 0.0000467236 0.0008957231 0.0000289816 -0.0014241101 -0.0000558948 -0.0163644931 -0.0169158883 0.0985182016 -0.1149654882 -0.0990974780 -0.3308377253 0.2666638520 0.2119087736 0.1844386452 0.1539760296 0.2053223135 0.0583540292 0.0158953465 -0.0119665312 -0.1097907088 0.2937074279 0.2530977586 0.0880627889 -0.4466169236 -0.1925985946 0.2513896099 0.2955225371 0.1483782975 0.1116879214 -0.0027129300 -0.0007599391 -0.0015809077 -0.0039928655 0.0024889201 -0.0089622280 0.0001075405 0.0012215495 0.0023053010 -0.0001712822 0.0005184122 -0.0009781031 0.0003814570 -0.0018694064 0.0004212398 0.0009599190 0.0000301963 0.0004449469 0.0024377927 0.0014738320 0.0010331944 -0.0001505786 0.0000714426 0.0001295237 -0.0003595550 0.0005561416 -0.0002552862 0.0016975401 -0.0000809282 -0.0001565722 -0.0018431262 -0.0006315521 -0.0003974368 0.0005511380 -0.0002591141 0.0007128710 0.0006853976 0.0008970828 -0.0000977274 -0.0004843582 0.0011320253 0.0009090060 -0.0010306020 -0.0024515273 -0.0018547883 0.0059517737 0.0329555346 -0.0161189931 0.1986292277 -0.1893070893 0.1414589999 -0.0416337673 0.0367492137 -0.0134403917 -0.0230088016 0.0209728048 -0.0065403216 0.0606492308 -0.0543147243 0.0293962376 -0.0478420615 0.0444539282 -0.0252563740 0.0822676550 -0.0703068114 0.0399782062 -0.0215788041 0.0195143736 -0.0134283693 -0.3259100441 0.2632276312 -0.2064949340 0.2829287415 -0.2283041466 0.1682334757 -0.5257773429 0.3366170481 -0.3081307759 0.0081671323 -0.0026666289 0.0127205539 -0.0029583038 -0.0105776638 -0.0147842167 0.0011530773 -0.0093006735 -0.0294538742 -0.0001946211 -0.0054892695 -0.0096224415 -0.0005803105 -0.0024195862 -0.0037330096 0.0005274141 0.0029799735 0.0016310382 0.0025317465 0.0032482307 0.0010709440 0.0084238571 0.0081520752 0.0055031339 -0.0062508951 -0.0041920514 0.0070361800 0.0031779208 -0.0028229887 0.0051988736 0.0083233710 0.0018152480 0.0062656615 0.0079095029 0.0034068179 0.0167759431 -0.0091750255 0.0030735292 0.0084222739 -0.0080308580 0.0014830632 -0.0042037950 0.0071900902 -0.0024516329 0.0032776258 -0.0058602635 -0.0060369275 0.0093956888 -0.0004411103 0.0001152538 -0.0000073263 -0.0018063182 -0.0013737469 0.0007346621 -0.0016079232 0.0011976943 0.0012132385 0.0001831986 -0.0006211098 -0.0005119673 -0.0004649038 -0.0006685329 -0.0004928631 0.0003355378 0.0005566388 0.0003063670 0.0002628043 0.0005459631 0.0003227400 0.0003912994 0.0005104896 0.0003083291 0.0003968869 0.0000987779 0.0001191790 0.0003377667 -0.0001518010 -0.0004713167 -0.0004585275 -0.0012486626 0.0002986001 -0.0005548246 0.0006961614 -0.0027369849 0.0001055873 -0.0017739059 0.0020095176 -0.0009807053 -0.0007896849 -0.0001471451 0.0007120646 -0.0010444961 -0.0001887213 0.0023670607 -0.0001195872 0.0005919764 -0.0023399414 0.0008856495 0.0013231867 0.0010084384 -0.0013367260 -0.0012880452 -0.0008345183 -0.0005898492 -0.0003560694 0.0011414251 -0.0001028805 -0.0013821334 0.0013631567 -0.0003965345 -0.0011311800 0.0002630816 0.0000708966 -0.0002404773 0.0012029176 -0.0021453852 0.0022381748 -0.0026580955 0.0091609979 -0.0021977590 0.0037255360 -0.0024387618 0.0060774054 0.0028030312 0.0017854388 -0.0021127223 0.0007466038 -0.0035221824 -0.0041482841 -0.0018075777 -0.0011535078 -0.0019175960 0.0212965891 -0.0410901710 0.0240819623 -0.0248352262 0.0235484110 0.0074550658 0.0026566000 0.0001738256 -0.0020328356 -0.0051314242 0.0014505592 -0.0091207980 -0.0058196562 -0.0029703260 0.0029520559 0.0000775753 0.0000054197 -0.0000996529 0.0001657413 -0.0003437575 -0.0003193125 -0.0001298827 0.0001024780 -0.0000368288 0.0001669122 -0.0000194979 0.0004321265 0.0001354653 0.0001420971 0.0000024235 -0.0002140163 -0.0004399081 0.0000518639 0.0005826181 -0.0003373838 -0.0001227228 0.0000180045 -0.0000669881 0.0000579645 0.0005144867 0.0000945895 0.0002578705 -0.0003267337 -0.0007461256 0.0006222944 -0.0021440816 -0.0010886603 -0.0035977294 -0.0000901667 0.0001792178 0.0057053438 0.0000086842 0.0000342852 -0.0000015174 0.0000181091 0.0000047507 -0.0000377756 -0.0007688991 0.0001212715 -0.0005534321 0.0003319750 -0.0000215676 0.0005416421 0.0001378975 -0.0007680668 -0.0000273879 0.0004855800 -0.0000948601 0.0001694988 0.0007817629 -0.0009646330 0.0002272412 -0.0003117237 0.0010459453 -0.0028559364 -0.0002766690 -0.0001308104 -0.0002552739 -0.0000585082 0.0002485579 -0.0000821634 0.0007740221 -0.0002845210 0.0011688532 0.0003827105 0.0009001300 0.0011141247 0.0020452022 0.0010137982 0.0012574289 0.0000830019 -0.0003297937 -0.0001424175 -0.0004144783 -0.0003205557 -0.0002245921 -0.0016230562 0.0013782266 -0.0011303179 -0.0008892773 -0.0001544541 -0.0006366260 -0.0024039827 0.0007608382 -0.0009326793 -0.0005570379 -0.0023345954 -0.0000344677 0.0006937306 0.0002842890 0.0003679221 -0.0015911174 -0.0023165140 -0.0015202270 0.0005831183 0.0002505508 0.0004197900 -0.0022612936 0.0032011931 0.0029007224 0.0024115081 -0.0102556814 -0.0094983899 0.0012095924 -0.0077555222 -0.0096963730 0.0144146681 0.0094872802 0.0163130393 0.0023387498 -0.0005464125 -0.0030314998 0.0047628425 0.0054496954 0.0022361899 -0.0084008841 -0.0018547679 0.0038003347 0.0132470248 0.0086194316 0.0004904410 -0.0029715700 -0.0029119510 0.0008925348 0.0079655230 -0.0018132765 -0.0030204259 0.0006073998 -0.0002050428 -0.0003140434 0.0046192816 -0.0045721371 -0.0049099124 0.0020911327 -0.0009158976 -0.0001555814 0.0034401229 0.0016410079 0.0005905124 0.0050089509 0.0003736966 0.0048903008 0.0002110678 -0.0017274807 -0.0002869157 -0.0037055880 0.0057199065 -0.0008170600 0.0089110723 -0.0028722461 0.0047682195 -0.0056781393 -0.0015981086 -0.0013245094 -0.0053767686 0.0050030145 0.0012933174 0.0047512807 0.0027397671 0.0035790851 -0.0007314163 0.0023197230 0.0009340009 -0.0042575800 -0.0101539184 -0.0066982074 -0.0315639739 0.1612819625 -0.0991432610 0.0070262726 -0.0046441625 -0.0000169146 -0.0003928645 0.0004227964 -0.0029106877 0.0025448024 0.0024967221 0.0049608040 0.0057133620 -0.0004796411 -0.0068288880 -0.0049801434 -0.0069912332 0.0001095484 -0.0000689182 -0.0008988883 -0.0001972181 0.0003312483 0.0021271113 0.0008314835 0.0008399619 0.0040054373 -0.0101550025 -0.0086654457 -0.0043910741 0.0001575564 0.0011156887 0.0091017521 0.0042698057 -0.0057950792 -0.0076076207 0.0143200723 0.0020277603 0.0041145463 -0.0148364881 -0.0548836669 0.1671540039 -0.1401170103 0.0086920914 -0.0139672323 -0.0029892697 0.0054678089 -0.0043314124 0.0070844834 -0.0182946810 0.0070414504 -0.0048432344 0.0055319844 0.0125822656 -0.0058308993 -0.0025599302 0.0083987354 0.0008488128 0.0023619958 -0.0083891089 0.0076412946 0.0418568107 -0.0752007304 0.0160273301 0.0436272991 -0.0128142265 0.0218616458 0.0302312527 -0.0434174176 0.0216211738 -0.0277424203 0.0431434378 0.0047343032 -0.0203290742 0.0448603937 -0.0043860715 -0.0007232536 -0.0039087186 0.0024317714 -0.0397302539 0.0548759445 -0.0050588744 -0.0036744970 0.0025124107 -0.0008558163 0.0683196360 0.0175601137 -0.0595962314 0.0764890114 0.0441293172 0.0061443906 0.0415363670 0.1222417759 0.0645603165 -0.0068485670 -0.0257832439 -0.0065727795 -0.0012965170 0.0000443309 0.0027693376 0.0006657957 -0.0053758678 0.0028629532 -0.0013453563 -0.0064710399 0.0006185737 -0.0301912498 -0.0877051448 -0.0822644598 -0.0888891071 0.0167653203 0.0799881917 0.0002520110 -0.0038131780 0.0044208875 0.0032566183 -0.0002999828 -0.0107308883 0.0009471596 -0.0016379153 -0.0030819402 0.0106572343 0.0065022202 0.0035325440 0.0193885856 0.0066188694 0.0077623339 -0.0111770359 -0.0020807419 -0.0067328099 0.0056950873 -0.0058580582 -0.0103024621 -0.0050972093 0.0106026420 0.0063307091 -0.0114240599 0.0105480842 0.0109761476 0.0359190366 0.0451210143 0.0401961813 0.0459231261 0.0423680239 0.0048005750 -0.1536099286 0.1003352635 0.2369864225 -0.0031136684 -0.0003758297 0.0003869790 0.0007532426 -0.0008916260 0.0013829954 0.0013465019 0.0023980715 0.0011090648 -0.0003598655 -0.0000316716 -0.0000443337 0.0016556008 -0.0018144678 -0.0019463073 -0.0002013305 0.0004196058 -0.0008129202 -0.0014995439 0.0086901315 -0.0023739058 0.0038286671 -0.0018638340 0.0030469879 0.0002092345 0.0003488631 0.0002616694 -0.0000921954 0.0053815735 -0.0054337663 0.0015251234 -0.0033000172 0.0011977819 -0.0010986355 -0.0021707785 -0.0001813095 0.0030746191 -0.0020248554 -0.0049425523 -0.0003860223 -0.0012566272 0.0007314095 0.0034948405 0.0025449424 0.0040497370 -0.0007789151 -0.0010827353 0.0012937927 0.0058156908 0.0082993054 -0.0049725409 -0.0037203176 -0.0109083068 -0.0011170944 0.0010309879 0.0011640274 0.0002049744 -0.0055263745 -0.0073860386 0.0104296573 0.0040738623 0.0063473810 -0.0028390062 -0.0000675175 -0.0000932921 -0.0000334149 -0.0002258353 -0.0004053232 0.0001166266 -0.0005748757 0.0001881155 0.0012983363 -0.0002485537 -0.0010314977 -0.0015358188 0.0009449187 0.0009639470 -0.0006196538 0.0049563001 -0.0047698837 -0.0029064574 0.0008813274 0.0058172108 0.0007669549 0.0006535362 -0.0003687023 -0.0008852453 -0.0037671426 0.0071687306 -0.0003204932 0.0022294972 0.0003154023 0.0010095293 -0.0009099816 0.0000325680 0.0010256053 -0.0055867212 -0.0020042494 0.0024626615 -0.0045241647 0.0003830700 -0.0010240290 -0.0041322659 -0.0004168772 0.0067670266 0.0052592173 0.0022155080 0.0023638901 0.0006331375 -0.0014500753 0.0008263225 -0.0007581059 0.0019338699 -0.0011561298 -0.0037490983 0.0025029032 -0.0016332547 -0.0049735346 0.0027631525 0.0011008944 -0.0031045292 -0.0002047444 -0.0067371505 -0.0002859958 -0.0032488135 -0.0008362138 -0.0000486064 -0.0005855426 0.0006413380 -0.0040404521 -0.0031101054 0.0018433746 0.0022927143 -0.0031415193 -0.0017752750 0.0969641093 0.0004794681 -0.0553970308 0.0900793746 0.2679574808 0.4313859102 -0.1977684497 -0.0007133339 0.0943167839 -0.2590489658 -0.2190499392 -0.2651379068 -0.0700575055 -0.0926399153 0.0178124435 -0.3081204559 -0.0582768066 0.1009588010 -0.2494060046 0.0003904972 0.0601455104 0.0701632083 0.0928111584 -0.0546024929 0.0143711995 0.0096912364 0.0056133731 0.0389067620 -0.0110348267 0.1545403589 -0.0150103756 0.0058006899 -0.0294508673 -0.0188183561 0.0177332408 0.0075004417 -0.0015913904 -0.0002785607 -0.0006046984 -0.0017289760 -0.0012409212 0.0017809654 -0.0200775946 -0.0054875335 -0.0118425902 -0.0065858106 0.0016870845 0.0075106512 0.0119932354 -0.0191581251 0.0007517826 -0.0201444905 0.0070029409 -0.0566866606 0.0210813067 0.0080317997 0.0012661524 0.0174335456 -0.0137936627 -0.0003773942 -0.0050795784 0.0001393509 -0.0008836122 -0.0019335565 0.0026342568 0.0011983515 -0.0014684648 -0.0017444684 -0.0004647821 -0.0024347946 0.0103758225 -0.0073937633 -0.0019686530 0.0011678838 -0.0010280019 0.0001960221 -0.0004277914 0.0000639165 -0.0001322962 0.0003107283 0.0001703239 0.0001166044 -0.0000142248 -0.0003941057 -0.0005144866 0.0001518867 -0.0000940858 0.0002651679 -0.0004139321 0.0002066676 -0.0000372781 0.0000057551 0.0000757502 0.0002606315 -0.0006273541 -0.0004749996 0.0015860494 -0.0016110150 0.0015330643 -0.0017172769 0.0000643784 -0.0011167170 0.0005627496 -0.0006091183 0.0008420228 -0.0001106708 0.0006260190 -0.0005652152 0.0022008687 -0.0055506442 0.0038415151 0.0004937390 -0.0004260788 -0.0003978741 0.0000681621 -0.0009326566 -0.0027579947 0.0024417946 0.0028774762 0.0008275809 -0.0025787247 -0.0017184825 0.0018988218 0.0005815746 0.0013559438 -0.0000234319 -0.0007783961 -0.0011340302 0.0008049356 0.0057604077 -0.0003539106 0.0001412047 -0.0054232674 -0.0024407206 -0.0010231016 0.0035602885 -0.0029305247 0.0006925644 -0.0037301005 0.0013185397 -0.0013008567 -0.0003780554 0.0008212180 -0.0032765620 0.0006152702 0.0002779583 0.0007232760 -0.0073030803 0.0049774659 -0.0004346348 0.0135918118 -0.0075071084 0.0017399517 0.0008945444 0.0000436999 -0.0014855947 0.0011123099 0.0011107197 0.0007549931 0.0009475010 0.0026096661 0.0011805418 -0.0003114112 -0.0009628846 -0.0000221880 0.0001111761 0.0003109835 0.0000439432 0.0004013847 0.0000589619 -0.0001691366 -0.0000039138 0.0001260672 -0.0001183572 -0.0003595737 -0.0018617217 -0.0019368220 -0.0019218583 0.0003429127 0.0016855718 -0.0002217575 -0.0003424705 -0.0000560524 -0.0000840417 0.0003813382 -0.0018760077 0.0000438296 -0.0007541541 0.0006658004 0.0009056427 0.0003322127 0.0007386440 -0.0019850359 0.0001003002 -0.0001567817 0.0010184261 -0.0002017061 0.0004238341 -0.0005257948 0.0000603803 0.0005703020 -0.0002630070 -0.0001314381 0.0004343401 0.0002330279 -0.0003310703 -0.0003279922 0.0013379906 0.0010219340 0.0004197197 0.0016017332 0.0008914919 -0.0003114761 -0.0033451832 0.0022501441 0.0053226855 0.0108164382 0.0041837605 -0.0020358183 -0.0015037587 -0.0008624687 -0.0020531322 -0.0078279597 -0.0107002151 -0.0069595643 0.0006051027 0.0028139029 -0.0009927598 -0.0007226965 -0.0012319795 0.0132764796 -0.0031314788 0.0037269266 -0.0036432341 0.0044810316 -0.0039271813 0.0006305317 -0.0215258703 0.0084679004 -0.0135811056 -0.0000895740 -0.0018499101 0.0005019199 -0.0123594783 0.0385428090 -0.0054842788 0.0121275243 -0.0275138151 0.0147911036 -0.0005792406 0.0018336184 0.0016304888 -0.0076711074 0.0100949543 0.0119422039 0.0027349971 -0.0003993864 -0.0004672331 -0.0090206008 -0.0049008189 -0.0126097306 0.0009377366 0.0026015600 -0.0011010418 -0.0019814158 0.0009704436 0.0035110282 -0.0084234406 0.0193705499 0.0043759924 -0.0013500725 -0.0000900043 0.0000091737 0.0036293392 0.0155569477 -0.0226557902 -0.0092678988 -0.0121448549 0.0064458334 0.0002723886 0.0005577751 0.0011637963 -0.0001536463 0.0001156831 -0.0014341081 0.0004873295 -0.0005033734 -0.0015509035 0.0001318764 0.0005982404 0.0018246223 0.0105478107 -0.0077712807 0.0279358497 -0.0075363245 0.0152619531 0.0265161433 -0.0493387091 -0.0090939678 -0.0916629812 0.0349803189 0.0048832852 0.0777596115 0.2975798515 -0.0802756457 0.4661374033 -0.2370354678 0.0587126004 -0.4054700340 -0.0376370960 -0.0019596991 -0.0720621322 0.0361325464 0.0007893847 0.0350808689 0.2998460416 -0.0561718379 0.3757723944 -0.1352362133 0.0211001096 -0.2546492076 -0.0168577356 -0.0097988217 -0.0155017927 0.0004687175 0.0052162963 -0.0095717628 -0.0075616756 -0.0008176424 0.0215900979 0.0172530659 -0.0095745883 -0.0045601372 0.0967159607 -0.0155387553 -0.1052267286 -0.0262825791 0.0017057423 0.0780710203 -0.0101215090 0.0153729447 0.0269789065 0.0095101969 -0.0025733932 -0.0231408950 0.0926925364 0.0074170127 -0.1293418929 -0.0712161517 0.0076182582 0.1194273401 0.0013980645 0.0006685299 -0.0002972272 0.0023289962 0.0032174294 0.0066746116 -0.0022744848 -0.0006935381 0.0002339521 -0.0019328486 -0.0022280603 -0.0011560648 -0.0009980041 -0.0015217110 -0.0009816965 0.0003619889 0.0019012259 0.0021124015 -0.0093825305 -0.0019301799 0.0038763869 0.0031839751 0.0021839091 0.0002013768 0.0170046428 0.0155504672 -0.0061415806 -0.0611658710 0.0106324353 -0.0253950694 0.0004294052 -0.0044976266 0.0100607461 -0.0137223210 0.0065439489 0.0153638704 -0.0022014478 0.0027940727 -0.0026243526 -0.0004743956 0.0020727907 0.0006328638 -0.0201832307 -0.0126197081 -0.0068876574 -0.0141240595 -0.0031342339 0.0255915536 0.0062314807 -0.0084150404 -0.0054270535 0.0390596986 0.0026075502 -0.1314130363 0.0180822357 0.0066809901 0.0005044335 0.0152914617 -0.0123097870 -0.0007833732 -0.0044129989 -0.0003120593 0.0000093081 -0.0015224526 0.0023371848 0.0007657297 -0.0015763397 -0.0015089062 -0.0008168937 -0.0018237989 0.0079932339 -0.0056260596 0.0045235164 -0.0039785576 0.0026909488 -0.0008884521 0.0005995509 -0.0004212934 -0.0003752535 0.0004750531 0.0000826058 0.0008398388 -0.0004310488 -0.0000060542 -0.0000875318 -0.0005179405 0.0001302979 0.0002946278 -0.0002181547 0.0000373617 -0.0001494615 -0.0000972297 0.0000090394 -0.0031586912 0.0027199416 -0.0025195178 -0.0014015457 0.0005396997 -0.0004554884 -0.0019921696 0.0013947713 -0.0012705319 0.0006106268 -0.0004968104 0.0008022812 -0.0001562554 0.0004744870 -0.0005772598 0.0021250150 -0.0056373491 0.0037559240 0.0004318314 -0.0005155278 -0.0004981339 0.0000718358 -0.0012967044 -0.0037331585 0.0032072227 0.0034667118 0.0011668461 -0.0033528769 -0.0018428015 0.0024724809 0.0007497070 0.0012252018 0.0001336780 -0.0008195118 -0.0010347801 0.0008532253 0.0067709648 -0.0001346701 0.0007149167 -0.0051582406 -0.0045058165 -0.0003613409 0.0026316089 -0.0018890428 0.0010841764 -0.0034200430 0.0010286266 -0.0011425730 -0.0006591273 0.0008636802 -0.0043936455 0.0004442551 0.0002627873 0.0005981234 -0.0041723288 0.0023585736 -0.0003161947 0.0073493098 -0.0032993491 -0.0003889802 0.0006128649 -0.0000217140 -0.0010802001 0.0006882542 0.0008519060 0.0007005076 0.0007015636 0.0019174884 0.0008252970 -0.0002351623 -0.0008024920 -0.0000409655 0.0000800991 0.0002793551 0.0000490791 0.0003896026 0.0002330731 -0.0001136868 0.0000107484 0.0001435094 -0.0000791921 -0.0001950586 -0.0013856495 -0.0014747550 -0.0014510481 0.0002655270 0.0012473735 -0.0002155850 -0.0002247992 -0.0000633500 -0.0000570199 0.0003517294 -0.0016814605 0.0000880195 -0.0008624259 0.0005774477 0.0000751518 -0.0003555679 0.0004543952 -0.0017754613 -0.0002235363 -0.0002754180 0.0012950578 -0.0002239109 0.0005683022 -0.0006001176 0.0001131915 0.0005791221 -0.0001715738 -0.0001679201 0.0003003348 0.0001128704 -0.0002608459 -0.0002662620 0.0010935645 0.0007818895 0.0002128546 0.0013519973 0.0006287945 -0.0003505940 -0.0024906743 0.0016759332 0.0040064578 0.0148906643 0.0039979393 -0.0037291490 0.0000869090 -0.0041179778 -0.0009912212 -0.0112812561 -0.0039714800 -0.0117497067 0.0039801329 -0.0034935868 0.0021335613 -0.0112647939 0.0157084891 0.0072776020 0.0043025961 -0.0088427759 0.0070537786 -0.0126027746 0.0073175378 -0.0111511854 -0.0006911638 -0.0414909732 0.0119761259 -0.0017919708 0.0025825737 -0.0003594693 0.0131431075 -0.0625521830 0.0472439106 -0.0269038962 0.0558976705 -0.0286391907 -0.0046048030 -0.0043993659 0.0034366120 0.0007650187 0.0130057438 0.0033583541 -0.0012181006 -0.0043724182 0.0014728150 0.0025073448 0.0049467454 -0.0104752708 -0.0046766290 -0.0041230680 0.0046725988 0.0252136573 0.0266429134 -0.0139588827 -0.0362661292 -0.0308352771 0.0237600740 0.0008479236 0.0025865642 -0.0007991771 -0.0258418462 -0.0459953983 0.0101178154 0.0219510852 0.0309165506 -0.0147695004 0.0010413148 -0.0001827345 0.0012151007 -0.0003881497 -0.0009803824 -0.0017423368 -0.0001868264 -0.0007346189 -0.0009046466 -0.0001846437 -0.0002074130 0.0011924775 -0.0094106412 -0.0015323086 -0.0052885810 -0.0174595626 0.0143455706 0.0029436869 0.0153596294 -0.0147796958 0.0305601450 -0.0138681285 -0.0033090064 -0.0277074109 -0.0975147134 0.0070921556 -0.1686864921 0.0837705720 -0.0274030715 0.1507537277 0.0180551928 0.0051362787 0.0217241091 0.0067514178 0.0061857623 -0.0181518049 -0.0749228378 0.0207639895 -0.1247609074 0.0527461114 -0.0042978555 0.0536271714 -0.0106708525 -0.0112794883 -0.0253478563 0.0107960220 0.0040840263 -0.0252181266 -0.0309400762 0.0140528688 0.0658981329 0.0258621439 -0.0097519245 -0.0237943650 0.2820384571 -0.0265556862 -0.3433395808 -0.0945418748 0.0104656757 0.1860799588 -0.0426124999 0.0219733702 0.0922733492 0.0341947069 -0.0155330144 -0.0854181718 0.3062217481 -0.0065706244 -0.4666598800 -0.2617523853 0.0079814900 0.4456975975 0.0008778925 0.0008379245 -0.0002519935 0.0023361872 0.0018665850 0.0053007155 -0.0020731928 -0.0017011760 -0.0012811404 -0.0006578971 -0.0015079380 0.0006203175 -0.0005820928 -0.0011723127 -0.0008405249 -0.0000250934 0.0015129307 0.0016680212 -0.0073599233 -0.0013645236 0.0030207403 0.0029552396 0.0019561749 0.0001046903 0.0416540288 0.0341601969 -0.0057307004 -0.0997840429 0.0178697510 0.0298324406 -0.0053001554 -0.0033827554 0.0036484927 -0.0421583275 0.0378403477 0.0519311219 -0.0094124201 0.0011269088 -0.0101407607 -0.0083532016 0.0046765229 0.0109224555 -0.0539266892 -0.0216918051 -0.0524507939 -0.0016047690 0.0043189761 -0.0013735818 0.0303906039 -0.0436277912 -0.0005416196 -0.0905370227 0.0138513287 -0.0320531226 0.0597034859 0.0206273395 0.0027340648 0.0497027097 -0.0385694689 -0.0004444308 -0.0147442146 -0.0002251290 -0.0021785632 -0.0051118093 0.0061098068 0.0023214310 -0.0036335367 -0.0031354922 -0.0004489253 -0.0061004341 0.0237932917 -0.0161670269 0.0158591633 -0.0136755651 0.0092809671 -0.0030418771 0.0021415788 -0.0015223983 -0.0013102586 0.0015933619 -0.0000130743 0.0025786302 -0.0015169609 0.0004804921 0.0002643752 -0.0017259770 0.0005007178 0.0006100746 -0.0006603677 0.0000835073 -0.0004388769 -0.0005738485 0.0000142177 -0.0117275515 0.0100060781 -0.0083509767 -0.0065192477 0.0037957670 -0.0028396177 -0.0055361963 0.0028983807 -0.0036540031 0.0022915467 -0.0013930073 0.0023254594 -0.0006697098 0.0014097359 -0.0017205473 0.0078468322 -0.0217341024 0.0150194855 0.0013849960 -0.0016885568 -0.0017283066 -0.0000037060 -0.0045218655 -0.0139896752 0.0114868830 0.0130680647 0.0042761945 -0.0121746926 -0.0069086284 0.0091873848 0.0022917608 0.0045365521 0.0005063802 -0.0021893529 -0.0042382388 0.0029446040 0.0260438225 -0.0026040745 0.0040051024 -0.0192650495 -0.0158222294 -0.0013906711 0.0102535690 -0.0086688863 0.0047325859 -0.0141898008 0.0074778540 -0.0048123592 -0.0014674342 0.0006799099 -0.0157824285 0.0016595254 0.0011690382 0.0017614678 -0.0150680141 0.0055577253 -0.0006454952 0.0178111892 -0.0314463969 0.0131447476 0.0027719015 -0.0000330484 -0.0040460667 0.0027919924 0.0035499964 0.0027554607 0.0028805969 0.0074404202 0.0032544629 -0.0010097785 -0.0026934040 -0.0000513749 0.0003413124 0.0009356140 0.0001590182 0.0010524884 -0.0007407915 -0.0005803623 -0.0000519510 0.0003716916 -0.0003798502 -0.0008482232 -0.0052980533 -0.0056148983 -0.0055386604 0.0009041956 0.0047061745 -0.0004493102 -0.0018267512 0.0003729623 -0.0003118212 0.0011114654 -0.0054959987 -0.0001133411 -0.0010876030 0.0018905123 0.0054893378 0.0035205035 0.0028731777 -0.0049333664 0.0021262041 0.0003648317 -0.0004658943 0.0001420303 0.0007983359 -0.0014905315 0.0001288348 0.0017487149 -0.0008414720 -0.0003663997 0.0013122404 0.0010502076 -0.0012225635 -0.0011542377 0.0044017145 0.0029752581 0.0008369799 0.0051721110 0.0025374602 -0.0013598956 -0.0097759768 0.0066161822 0.0156052710 0.0313971624 0.0156671613 -0.0118189741 0.0011418393 -0.0128084736 -0.0032923674 -0.0273574239 -0.0054214733 -0.0255799746 0.0101760014 -0.0123172431 0.0081194418 -0.0325737944 0.0518409262 0.0043741841 0.0190291368 -0.0376673954 0.0266207028 -0.0365020140 0.0263953358 -0.0343645204 -0.0001615379 -0.1091538667 0.0426352754 -0.0044417104 0.0086659522 -0.0016506760 0.0672529345 -0.2405854155 0.1561553311 -0.1098274201 0.2250782023 -0.1186753339 0.0197549787 0.0318473893 -0.0078002771 -0.0410131113 -0.0146832820 0.0363591142 0.0199720636 0.0244357114 -0.0137854970 -0.0676051380 -0.0703844119 0.0087795966 0.0475526808 0.0586602448 -0.0354245584 -0.1296530740 -0.1324621112 0.0850876021 0.1233685725 0.2354138506 -0.0989609698 -0.0108185170 -0.0161749323 0.0052629794 0.2453360341 0.4192706850 -0.2168653911 -0.2440981660 -0.3354153583 0.1811673349 0.0028764929 -0.0009511257 0.0018544171 -0.0010154098 -0.0028564564 -0.0036620533 0.0039073608 0.0018409748 -0.0012819551 0.0014965652 0.0044076344 0.0018743820 -0.0136607076 -0.0053375174 0.0040033212 -0.0526433025 0.0494512368 0.0256666738 0.0014733210 -0.0545635762 0.0131159527 -0.0113757926 -0.0045595548 -0.0121648225 -0.0406600750 -0.0495675415 -0.0955003739 0.0323764070 -0.0309451080 0.0855956674 0.0146265274 0.0040997353 0.0049220176 0.0505973658 0.0214662629 -0.0307445214 -0.0121399959 0.0106636718 -0.0642047317 0.0627363058 0.0133770275 -0.0220964243 -0.0683530105 -0.0303138909 -0.0256522702 -0.0104137020 0.0074766296 -0.0019968759 0.0148286209 -0.0065582246 -0.0096608740 0.0430980913 -0.0393377572 0.0315310041 -0.0365827416 -0.0031107903 0.0844103923 0.0590539974 -0.0366689690 0.0183984934 0.0224905351 0.0539906940 -0.0189298849 -0.0146415743 0.0083135479 0.0191928591 -0.0456703056 0.0621719245 0.1350683057 0.0625359887 0.0201990752 -0.1291826410 0.0039324970 0.0028417057 -0.0015801267 0.0089065195 0.0089979850 0.0224460327 -0.0088587845 -0.0057144995 -0.0035368618 -0.0049902494 -0.0074479605 -0.0007582147 -0.0031648917 -0.0040004645 -0.0028802784 0.0029576993 0.0055849569 0.0055183016 -0.0257501713 -0.0059049203 0.0106827642 0.0076021301 0.0050616662 0.0009193744 -0.0138707490 -0.0052607947 -0.0089041075 -0.0090578573 0.0052025393 -0.0442669377 0.0008597615 0.0015852457 0.0103611336 0.0125581269 -0.0085479309 -0.0113546819 0.0042624842 0.0035185818 0.0037855121 0.0004216045 0.0035995874 -0.0003466534 0.0075320497 0.0054444393 0.0106922778 0.0020962962 -0.0003750613 0.0129715205 -0.0008213603 0.0103248236 -0.0113233142 0.0565168068 -0.0019995730 -0.0340345701 -0.0142594258 -0.0065267037 0.0000237131 -0.0097257164 0.0062763364 0.0001519920 0.0034496806 0.0010369666 -0.0008776380 0.0008635819 -0.0015661521 -0.0002227727 0.0008731095 0.0005345086 0.0004424138 0.0013675687 -0.0059623603 0.0035110593 -0.0184007859 0.0154393120 -0.0105481643 0.0032609282 -0.0026666952 0.0017831197 0.0009532609 -0.0008612177 0.0003034187 -0.0025095628 0.0017052980 -0.0009221829 -0.0011514153 0.0019402056 -0.0007892096 -0.0000171858 -0.0001970606 0.0003039213 0.0003587238 0.0000782983 0.0000800664 0.0124537696 -0.0114190553 0.0079891632 0.0093582231 -0.0066954806 0.0052014159 0.0018979193 -0.0027084771 0.0012146993 -0.0007509631 0.0002543350 -0.0009893908 0.0004729166 -0.0002437856 0.0010628765 -0.0018463565 0.0052004293 -0.0017930935 -0.0005180060 0.0012937369 0.0006298148 0.0000506063 0.0022965952 0.0070280925 -0.0043901484 -0.0059240183 -0.0020367807 0.0052880932 0.0016873152 -0.0041477704 -0.0005988335 -0.0007410197 -0.0005944260 -0.0003320263 0.0013792782 -0.0011756901 -0.0125595651 0.0047850635 -0.0048980490 0.0021565897 0.0112202001 -0.0030908837 0.0003686258 0.0007916900 -0.0046513835 0.0051073979 -0.0068593395 0.0006674897 0.0008022114 0.0002630929 0.0078543846 -0.0004264068 -0.0000934147 -0.0005589287 0.0031539237 -0.0023097405 0.0005156230 -0.0217365476 -0.0101947643 0.0069617551 0.0000925266 0.0003519950 0.0004480836 0.0000942276 -0.0002145023 -0.0004009521 -0.0001662285 -0.0004885341 -0.0001822009 0.0000705501 0.0003190163 0.0000805889 -0.0000560880 -0.0000832722 -0.0000764270 -0.0005434550 -0.0006550199 -0.0000944782 0.0000006348 -0.0000723952 -0.0000550664 -0.0000335195 0.0004614452 0.0005016421 0.0005157733 -0.0001266853 -0.0004120231 0.0003104298 -0.0005327290 0.0004556318 0.0000265264 -0.0001302653 0.0005484236 -0.0002929111 0.0010988326 -0.0002070082 0.0017327711 0.0018468979 0.0003471586 0.0019437023 0.0015418275 0.0006885308 -0.0017710257 0.0002306247 -0.0003717423 0.0003793735 -0.0001257894 -0.0002064657 0.0000252159 0.0000076051 -0.0000899091 0.0001570115 0.0000662042 0.0000166527 -0.0004737117 -0.0002922907 0.0002091930 -0.0007197365 -0.0000556633 0.0003224059 0.0007845176 -0.0005279036 -0.0013168975 0.0045250791 -0.0196792185 0.0122324080 -0.0049172347 0.0170146894 0.0055749573 0.0089508996 -0.0228169685 -0.0005745677 -0.0073027653 0.0225912531 -0.0148742014 0.0360498386 -0.0716098465 0.0498971503 -0.0396733322 0.0697370971 -0.0510822703 0.0517033077 -0.0384898823 0.0478551663 -0.0291074034 0.1122642937 -0.0913133625 0.0032633018 -0.0148929281 0.0038540094 -0.1452732022 0.4517983043 -0.2189294630 0.2081649314 -0.4218414514 0.2194431579 0.0179998816 0.0237302664 -0.0056842104 -0.0153751861 -0.0364671057 -0.0027181502 0.0088260399 0.0215983478 -0.0110698117 -0.0339626023 -0.0475020900 0.0430499404 0.0395845779 0.0438920306 -0.0302721746 -0.1016589164 -0.1063347267 0.0660137457 0.1080444724 0.1419175839 -0.0988958231 -0.0052208198 -0.0131751133 0.0044074535 0.2014248138 0.3231290313 -0.1245491082 -0.1939909888 -0.2625673387 0.1369330249 -0.0026518412 0.0026976918 0.0032940182 0.0005156648 0.0033050687 -0.0010596086 0.0021901701 0.0027333385 0.0033146639 0.0009337181 0.0020437495 -0.0032090319 -0.0014368241 0.0005861429 -0.0038918396 0.0131012793 -0.0122682926 -0.0085567179 0.0049359462 0.0134541802 0.0061724564 0.0014365368 -0.0006019164 -0.0057435176 -0.0183679718 0.0188597307 -0.0245813271 0.0176291040 0.0021401469 0.0152934661 0.0010379208 0.0017199992 0.0057170603 -0.0157805523 -0.0055294652 0.0043013679 -0.0229188711 0.0050418023 -0.0221182195 -0.0028979885 -0.0053866265 0.0287384215 0.0120302674 0.0053534053 0.0019981819 0.0071522747 -0.0037874468 -0.0029721262 -0.0064457580 0.0063884096 0.0100743591 -0.0047956233 0.0059607108 -0.0086705894 0.0411331915 0.0009902021 -0.0605627986 -0.0221509097 0.0086251313 0.0194065312 -0.0104705923 -0.0078100850 0.0160351737 0.0038672329 -0.0045266193 -0.0162874934 0.0477603587 -0.0133184781 -0.0882440370 -0.0487050424 -0.0021219786 0.0778806634 0.0002859675 -0.0012428542 -0.0003898861 -0.0019794915 0.0015038195 -0.0009924596 0.0005302034 0.0028966405 0.0036527434 -0.0028656149 -0.0010045508 -0.0049839224 -0.0005233830 0.0005977939 0.0009715288 0.0006246712 -0.0014150647 -0.0010707687 0.0054029269 0.0007303384 -0.0024416988 -0.0043178797 -0.0026753826 -0.0000422617 -0.0363235975 -0.0394125129 0.0219144997 0.1462013364 -0.0311407760 0.0111338414 0.0071904932 0.0017807793 -0.0180043408 0.0432267712 -0.0398398494 -0.0501823752 0.0077865915 -0.0061275622 0.0049602796 0.0070959413 0.0021525696 -0.0052852882 0.0533380075 0.0240066687 0.0500427950 0.0067880739 -0.0034216031 0.0183868449 -0.0221525444 0.0476036066 -0.0187406208 0.1482538355 -0.0134813491 -0.0132144473 -0.0644322166 -0.0243849096 -0.0042280580 -0.0540977363 0.0431875891 0.0027428718 0.0148251730 -0.0002639605 0.0018729599 0.0058820356 -0.0085027369 -0.0038013890 0.0054809847 0.0059148033 0.0025848631 0.0054290355 -0.0220684025 0.0171163584 0.0086190209 -0.0054557467 0.0040987780 -0.0010309764 0.0014469022 -0.0005928038 0.0001278414 -0.0005469101 -0.0005157913 0.0000394799 -0.0003976765 0.0012556687 0.0016678028 -0.0008800115 0.0004096483 -0.0011430667 0.0011805752 -0.0004019622 0.0002121527 -0.0000576782 -0.0002527812 -0.0030900806 0.0039959237 -0.0000639684 -0.0061142057 0.0056557533 -0.0059964499 0.0050316184 -0.0005500856 0.0036306374 -0.0013894956 0.0015235725 -0.0017562266 -0.0002394278 -0.0022421095 0.0005699873 -0.0080629134 0.0219352788 -0.0203676581 -0.0012539381 0.0004847205 0.0017420976 -0.0010387819 0.0051501004 0.0116623943 -0.0147685449 -0.0097414078 -0.0045296286 0.0141841403 0.0073281425 -0.0085265945 -0.0046240697 -0.0044425002 -0.0001757846 0.0073647456 0.0012051313 -0.0020728184 -0.0129049053 -0.0193854340 0.0065259667 0.0221949549 0.0177019413 0.0040572181 -0.0113728718 0.0006682439 0.0070088615 0.0012238325 0.0209371987 0.0033325656 0.0067500492 -0.0090998391 0.0153906213 -0.0014957997 -0.0008007611 -0.0020103857 0.0161448924 -0.0107819604 0.0012842956 -0.0511362096 0.0038457247 0.0033314535 -0.0013820927 0.0002761942 0.0033703844 -0.0018899568 -0.0024667783 -0.0022274120 -0.0019749681 -0.0055887704 -0.0022018050 0.0007061373 0.0027086099 0.0000469443 -0.0002963016 -0.0009965007 -0.0002573579 -0.0013531575 -0.0011084755 0.0003255206 -0.0000381148 -0.0006443802 0.0002569930 0.0002888025 0.0040651388 0.0045818446 0.0043538030 -0.0007853544 -0.0038310670 0.0009450971 0.0004171763 0.0004793996 0.0002047442 -0.0012509364 0.0058615088 -0.0005517447 0.0030386407 -0.0016216670 0.0003888397 0.0013257036 -0.0009482419 0.0069762718 0.0018525344 0.0013638182 -0.0056214740 0.0008695917 -0.0022355134 0.0024948876 -0.0005041774 -0.0026134318 0.0007092972 0.0007085843 -0.0013535275 -0.0007859357 0.0014159917 0.0012907766 -0.0034464809 -0.0023261274 -0.0006015949 -0.0040751485 -0.0020146027 0.0009529401 0.0074004789 -0.0049822632 -0.0119172791 -0.0524627265 0.0088953170 -0.0026077052 0.0060168855 -0.0096522996 -0.0064929766 0.0250074982 0.0454949764 0.0389361920 -0.0026136574 -0.0196551523 0.0128783937 -0.0130472472 0.0435185217 -0.0896835698 0.0384506276 -0.0599131856 0.0475903538 -0.0334018977 0.0184349936 -0.0294590500 0.0451442465 -0.0249223405 0.0907739574 0.0008526347 0.0121631817 -0.0039235321 0.1402788586 -0.4050214370 0.1364101232 -0.1864610148 0.3741240781 -0.1894281622 0.0188769623 0.0211199741 -0.0036175214 0.0004269090 -0.0563767616 -0.0306902681 0.0025560462 0.0227426171 -0.0107166833 -0.0162631608 -0.0385472206 0.0731967248 0.0397338866 0.0393438398 -0.0322436201 -0.0952471768 -0.0972603444 0.0621302070 0.1095839639 0.0958114528 -0.1136274575 -0.0022614479 -0.0129625083 0.0044279085 0.1989143172 0.3082442399 -0.0787196998 -0.1880470885 -0.2505493141 0.1243316292 0.0002954180 -0.0030567758 -0.0080877123 0.0006557634 -0.0013559363 0.0069579445 0.0013469834 0.0037085596 0.0068961101 0.0007274252 0.0006840083 -0.0071335485 0.0205779532 0.0063542567 -0.0025852388 0.0530530992 -0.0506329492 -0.0274783231 -0.0032750857 0.0550208071 -0.0162849994 0.0079133905 0.0089960049 0.0160263707 0.0502739328 0.0480369905 0.1079526337 -0.0389169668 0.0365432513 -0.0871699085 -0.0167480860 -0.0098756800 -0.0061835171 -0.0499807846 -0.0221278897 0.0322649482 0.0161404656 -0.0175889185 0.0749455081 -0.0683697331 -0.0146478970 0.0129458629 0.0669798153 0.0307200607 0.0262961084 0.0177158823 -0.0117420847 0.0009030602 -0.0144063394 0.0141107345 0.0107980521 -0.0408162724 0.0380583918 -0.0312949291 0.0407435001 0.0103670193 -0.0932640376 -0.0600459686 0.0377335665 -0.0108659881 -0.0241135356 -0.0519404872 0.0222369364 0.0083484767 -0.0115433779 -0.0242369162 0.0553229006 -0.0614705798 -0.1476579260 -0.0732852157 -0.0219050401 0.1301959156 -0.0016545094 -0.0033527780 0.0001919040 -0.0075828943 -0.0027430284 -0.0133616285 0.0049262258 0.0065564249 0.0067050759 -0.0017764203 0.0020867459 -0.0068630683 0.0009761609 0.0034893266 0.0030919897 -0.0003827008 -0.0058858073 -0.0057346385 0.0241482607 0.0042272213 -0.0101935896 -0.0114290943 -0.0074300297 -0.0002490451 0.0000235960 0.0000107816 0.0000858823 -0.0000812200 0.0000712337 -0.0001348732 0.0000270415 0.0000381877 0.0000036131 0.0000655345 0.0002726483 0.0002207457 0.0002009459 -0.0002022719 -0.0002122969 -0.0014805802 -0.0005873678 0.0018004110 -0.0003774530 -0.0001616359 -0.0009465967 0.0022162521 -0.0000740624 0.0044670894 0.0019708497 0.0008663252 -0.0051555769 0.0112260274 0.0001797389 -0.0170068298 0.0014893892 0.0007234501 -0.0009936571 -0.0001580533 0.0001536016 -0.0001262585 0.0000167614 -0.0005366726 0.0002998260 -0.0009286439 0.0006638507 0.0005282746 -0.0000704980 -0.0001318301 -0.0001824299 0.0000077967 0.0000304550 -0.0000298474 -0.0017470448 0.0012754381 -0.0008898151 0.0002598672 -0.0002423794 0.0001501686 -0.0000031169 -0.0000101347 -0.0000234196 -0.0001254829 0.0001323575 -0.0001465414 -0.0002141238 0.0001973016 -0.0000891147 0.0001087369 -0.0000847941 0.0000283182 -0.0000371354 0.0000239151 0.0000387424 0.0009433341 -0.0008318663 0.0004751739 0.0012022031 -0.0009834763 0.0008548295 -0.0007518152 0.0005412020 -0.0004580053 0.0000999963 -0.0000428744 -0.0000731235 -0.0000271674 -0.0000671689 -0.0000165791 0.0000421801 -0.0000819693 -0.0002345215 -0.0000836596 0.0002134331 0.0002463947 -0.0007955501 0.0017151077 0.0011527924 -0.0028593743 -0.0001632844 -0.0008534059 0.0028032131 -0.0004183933 -0.0007710073 -0.0013540070 0.0001970046 -0.0003033153 0.0023064122 -0.0016401699 0.0001425155 0.0025223100 -0.0085619024 0.0026740850 -0.0024977315 0.0096777448 -0.0010803713 0.0015410371 -0.0050186154 0.0026331551 -0.0066556318 0.0128624537 -0.0014815568 0.0052837933 -0.0068725892 0.0032189698 0.0000076961 -0.0000447249 0.0000954630 -0.0002758480 0.0010999200 -0.0002577855 -0.0061031379 -0.0073802514 0.0065553437 0.0000742114 0.0000053743 -0.0001847334 0.0003936285 0.0005953077 0.0004950868 0.0003202601 0.0004317059 0.0000965704 -0.0004534584 0.0000307179 -0.0003503099 0.0002299996 -0.0000563288 0.0002682327 -0.0003421387 -0.0015831936 0.0000395373 0.0000883725 -0.0000247153 0.0002267871 -0.0001048150 -0.0004877423 -0.0004564482 -0.0004883149 0.0000574447 0.0004068644 -0.0002577158 0.0002224886 -0.0002888313 0.0000590760 -0.0000883813 0.0000589678 0.0003925659 -0.0008280253 0.0003386403 0.0064004410 0.0061775702 0.0018273216 0.0029082943 0.0017577341 0.0012587467 -0.0043607482 0.0009790482 -0.0016074701 -0.0001351176 0.0001157701 -0.0003367433 0.0005540772 -0.0004524419 -0.0009390850 -0.0004633849 -0.0000074011 0.0001788672 0.0003311004 0.0002745913 0.0002998201 0.0004040814 0.0002295774 -0.0000983400 -0.0009138419 0.0006093491 0.0014251338 -0.0000882442 0.0000797545 -0.0000387737 0.0000290728 -0.0000968927 -0.0000837441 -0.0000141711 0.0001983319 0.0000749364 0.0000535116 -0.0001423057 0.0000935734 -0.0002015525 0.0004404127 -0.0004254995 0.0002727192 -0.0004230820 0.0003534870 -0.0002944241 0.0001015755 -0.0002808548 0.0001463685 -0.0007038829 0.0007718758 -0.0000364899 0.0001025191 -0.0000017009 0.0008574165 -0.0031519216 0.0013281110 -0.0013811628 0.0028339409 -0.0014318778 0.0673596007 0.0828592919 -0.0336762652 -0.0662647025 -0.0818826481 0.0408951224 0.0008144685 0.0142680714 -0.0067007539 0.0345932471 0.0395427568 -0.0184618083 -0.0355185304 -0.0449903219 0.0153630513 -0.3414673195 -0.4492357950 0.2221131336 0.3310123188 0.4799021708 -0.2526120230 -0.0003129692 -0.0085115653 0.0025321104 -0.1503182162 -0.2366631266 0.1118926660 0.1580570119 0.2361633754 -0.1488808897 0.0000199772 -0.0000105331 -0.0000195327 -0.0000120526 -0.0000362620 -0.0000175304 0.0010629746 0.0022193829 0.0030066630 0.0000204552 0.0009709714 -0.0022734139 -0.0000171862 0.0000528176 -0.0000061696 -0.0002393409 0.0001996726 -0.0000238366 0.0001034448 -0.0002883367 0.0002118847 -0.0001382956 -0.0000198587 -0.0002255567 -0.0008154297 -0.0001162294 -0.0013406757 0.0007817250 -0.0001530217 0.0012980874 0.0000978821 -0.0000382135 0.0001724662 0.0001708927 0.0001224356 -0.0001021288 -0.0006150315 0.0001087588 -0.0005335815 0.0001555985 0.0001593162 -0.0001310612 -0.0000670073 -0.0002480930 -0.0001759964 0.0030378657 -0.0017761656 -0.0001008072 -0.0009507273 0.0032804781 0.0016654353 0.0013369246 -0.0004334808 -0.0005583371 0.0068550753 0.0023563401 -0.0110022708 -0.0027239557 0.0005286098 0.0066320284 -0.0015998937 0.0011724035 0.0026342467 -0.0015136575 -0.0018261073 -0.0034089275 0.0076515089 0.0002479518 -0.0141162329 -0.0088333111 -0.0014341798 0.0096115671 -0.0004377157 0.0010939193 -0.0001712354 0.0019101616 -0.0013828833 0.0013160834 -0.0015482133 -0.0037258570 -0.0044814774 0.0022901040 0.0004008223 0.0043337006 0.0008125523 -0.0012444762 -0.0002550998 -0.0064223713 0.0001446402 0.0024441395 -0.0039950087 0.0015529395 0.0008496141 0.0049444993 0.0038990093 -0.0020465065 0.0003991680 0.0005936834 -0.0006964131 -0.0028224942 0.0005142880 -0.0028950491 -0.0001935311 -0.0001458238 0.0006731544 -0.0004468030 0.0003759398 0.0005026384 0.0000378119 -0.0000885969 -0.0000209801 0.0000237274 0.0000654183 0.0001223242 -0.0006047102 -0.0003592258 -0.0005299763 -0.0000860454 -0.0000004236 -0.0000502005 0.0002330724 -0.0004190611 0.0000714133 -0.0010489813 0.0001018418 -0.0003713283 0.0006078147 0.0002510600 0.0000917272 0.0003743614 -0.0002566915 0.0000196854 0.0000347723 0.0001948634 0.0001819679 0.0000000007 -0.0000425600 -0.0001402331 -0.0002617700 -0.0005813711 -0.0003072010 0.0003479910 0.0055328627 -0.0063141413 -0.4698877015 0.3938464797 -0.2623914968 0.0767973168 -0.0651808702 0.0507774528 -0.0010810117 -0.0004981424 0.0027119943 -0.0476976332 0.0393641362 -0.0296732250 -0.0587909147 0.0548735685 -0.0326699847 0.0326601728 -0.0257639051 0.0120444065 0.0024788012 -0.0024324174 0.0023121714 0.2795654079 -0.2630688076 0.1602712056 0.3544504364 -0.2867399295 0.2131006651 -0.2177296032 0.1324233523 -0.1344810167 0.0003769599 -0.0015003071 0.0009470528 0.0009354701 -0.0015702484 -0.0026530945 -0.0004539045 -0.0032526705 0.0047933738 0.0005888772 -0.0016824502 -0.0031435402 0.0025837942 -0.0065083995 -0.0075632938 0.0114217216 0.0034581945 0.0039683050 -0.0117733190 0.0001345329 0.0048538182 0.0058398469 0.0015594842 0.0019102658 -0.0087336627 0.0035463240 0.0013862770 -0.0031531621 0.0265261935 -0.0059217506 0.0062362892 -0.0346848893 0.0058713643 -0.0006713839 0.0135928686 -0.0056784321 0.0167550480 -0.0378693115 0.0057646011 -0.0170548163 0.0212984984 -0.0143168406 -0.0009504194 0.0027680139 -0.0009386071 -0.0027833246 0.0087531317 -0.0025087142 0.0003343704 -0.0001520325 0.0000238835 0.0007796450 -0.0004643652 -0.0007069909 0.0007973152 0.0011561257 0.0004890587 0.0006903346 0.0016036481 0.0007563963 -0.0003388263 -0.0005979691 -0.0001972327 0.0001253564 0.0001811972 0.0000728860 0.0002261413 0.0000873341 0.0001216910 0.0001537091 0.0000830578 0.0000601268 -0.0000854625 -0.0013596191 -0.0014746282 -0.0014803911 0.0002888938 0.0012711619 -0.0002260875 -0.0003430492 -0.0000810861 -0.0002792099 0.0002249619 -0.0008825081 0.0000282053 -0.0005425075 0.0006106030 -0.0000136584 -0.0001000705 -0.0001914595 0.0009572460 -0.0002847599 0.0000268111 -0.0006309388 0.0003333824 0.0004399372 -0.0007229970 0.0002040263 0.0003399745 0.0002688595 -0.0003400257 -0.0002952424 -0.0003028627 -0.0001530376 -0.0000759867 0.0008691515 0.0007472630 0.0002185131 0.0012365677 0.0007104644 -0.0002198965 -0.0024900564 0.0016430900 0.0039327674 0.0007150355 -0.0004318011 0.0006734098 -0.0044395435 0.0094442461 -0.0061300265 0.0049346725 -0.0083199013 0.0076515832 0.0017046468 0.0014896504 -0.0014852154 -0.0027588970 0.0038957901 -0.0058962024 0.0028376188 -0.0057899057 0.0041698337 0.0234650878 -0.0562251132 0.0265552353 -0.0355153168 0.0591102395 -0.0181963610 0.0002999838 -0.0006719783 -0.0006041621 0.0056101146 -0.0352359341 0.0115341388 -0.0195207860 0.0336349568 -0.0154628096 -0.0000981602 -0.0000805643 0.0000105834 -0.0001001153 0.0003334339 0.0002790881 0.0000737520 -0.0000311689 0.0000002335 -0.0002639029 -0.0001943553 -0.0003065610 0.0000744145 0.0001532999 0.0000005894 0.0003774862 0.0004435409 -0.0002532180 -0.0003725186 -0.0000202276 0.0004831390 -0.0000429376 0.0000150311 0.0000004660 0.0004311656 0.0005984901 -0.0007947423 -0.0004531939 -0.0006707172 0.0004826342 -0.0006701905 -0.0001904144 -0.0008492007 0.0001627932 0.0002331240 0.0017832423 0.0000102241 -0.0000170081 -0.0000641600 0.0000036471 0.0000143218 0.0000618993 -0.0006136215 -0.0001538092 -0.0000104777 -0.0006357260 0.0005546367 0.0002764713 0.0002599847 -0.0005236387 0.0005182425 -0.0000157254 -0.0003607024 -0.0005001287 -0.0015625322 -0.0002207592 -0.0029511706 0.0011384801 -0.0008711686 0.0018554981 0.0004254883 0.0004250610 0.0002945785 0.0003679590 0.0002530565 -0.0004694268 -0.0009344716 0.0006760065 -0.0022896381 0.0012288159 0.0000891013 0.0008233110 -0.0007577035 -0.0003771862 -0.0003449890 -0.0001332883 0.0000824609 -0.0000770993 0.0000749475 -0.0000117812 0.0000311970 0.0005127890 -0.0004645744 0.0002993230 0.0001977233 -0.0000610578 0.0001289835 0.0004048475 -0.0005169112 0.0004826519 0.0001639887 0.0006773855 -0.0000073228 -0.0000473234 0.0000629622 0.0000351707 0.0001815600 0.0007080056 0.0004468257 0.0001569164 0.0001836165 -0.0003739695 0.0002593828 0.0013331690 -0.0002907825 0.0022494258 0.0008496023 0.0041573694 -0.0030637206 -0.0030275433 -0.0028912257 0.0012449529 -0.0000139263 0.0020919406 -0.0005739440 -0.0005224982 -0.0007212037 -0.0003599135 0.0004965251 0.0002872436 -0.0054709642 -0.0015837434 0.0026475550 0.0022921178 0.0015596989 0.0007909800 0.0028401993 0.0026748622 -0.0011557445 -0.0095827166 0.0020441588 0.0006884748 -0.0005916922 -0.0000332164 0.0008644448 -0.0025423133 0.0044128307 0.0044482065 0.0005346377 0.0002107500 -0.0015203050 -0.0007960330 0.0005673956 0.0002656523 -0.0063119106 -0.0015893475 -0.0046146795 -0.0008307475 0.0004022717 -0.0010218700 0.0028616311 -0.0055043487 0.0015408862 -0.0139807988 0.0016250263 -0.0027056439 0.0064841649 0.0020181784 0.0005486785 0.0044003737 -0.0040277821 0.0010076508 -0.0009279538 -0.0006805317 -0.0022671314 -0.0018462029 0.0028322332 0.0033797289 0.0001336768 -0.0005917009 0.0015141581 -0.0071666565 0.0336830918 -0.0191553895 -0.0493477047 0.0413330045 -0.0279735741 0.0079767630 -0.0070814692 0.0049638001 -0.0005722961 -0.0004125103 -0.0016420790 -0.0059269365 0.0040129627 -0.0016628584 -0.0056100898 0.0072137532 -0.0035321143 0.0036482800 -0.0034898587 0.0022684695 -0.0000760478 -0.0007823807 0.0002397163 0.0286258069 -0.0265485437 0.0188806289 0.0406158415 -0.0309209118 0.0232634825 -0.0283214663 0.0191477198 -0.0159128419 0.0020272996 -0.0034515104 -0.0006190246 -0.0000362405 -0.0029055082 -0.0029556082 -0.0035654242 0.0268268990 -0.0464816031 -0.0070893283 0.0111221015 0.0078216524 -0.0388859541 0.0823826504 0.0681182840 -0.1303274431 -0.0236147609 -0.0420430627 0.1348244945 -0.0123439674 -0.0448310342 -0.0478271431 -0.0003386149 -0.0110214029 0.0928262411 -0.0655436104 0.0068937782 0.0697658792 -0.3419366330 0.0952676916 -0.1112457943 0.4494056583 -0.0654663001 0.0258188472 -0.1428939165 0.0889535501 -0.2696576201 0.5185003034 -0.0582954374 0.2393180496 -0.3151510485 0.1649685698 0.0007029315 0.0003255727 0.0003468876 -0.0149136878 0.0124166670 -0.0005066015 0.0051116822 -0.0017196520 0.0002501725 -0.0044447374 -0.0009811239 0.0021147812 -0.0027360228 -0.0039928985 -0.0027509918 -0.0031036590 -0.0067713590 -0.0031052879 0.0020660618 0.0018556209 0.0007706197 -0.0007781604 -0.0003606005 0.0000735430 -0.0018327014 0.0002372273 -0.0006446433 -0.0010448712 0.0000058154 -0.0001915000 0.0009226311 0.0043726793 0.0049017484 0.0045030109 -0.0007690296 -0.0033271702 0.0010239264 0.0003906390 0.0016807777 0.0022518705 -0.0004660282 0.0003782833 0.0004148779 0.0014197632 -0.0031494772 -0.0014574434 -0.0003913218 0.0024138440 -0.0107985530 0.0010458717 -0.0006301403 0.0149355539 -0.0049443646 -0.0038929096 0.0024781464 -0.0006403515 -0.0005512998 -0.0018103628 0.0017175479 0.0019369340 0.0016677261 0.0004703838 0.0001659612 -0.0031689839 -0.0022080083 0.0003093636 -0.0045306234 -0.0035352643 0.0010208335 0.0082228907 -0.0057687897 -0.0141930399 0.0026476247 -0.0003680512 0.0002563522 -0.0000856865 -0.0000242499 -0.0020476214 -0.0011668499 -0.0017397207 -0.0009628436 -0.0000680412 -0.0000630318 0.0002689769 -0.0009847684 0.0010732236 0.0014614586 -0.0003871338 0.0016342259 0.0006557759 0.0012174202 -0.0055222806 -0.0000066709 -0.0048594259 0.0006968421 -0.0001816438 -0.0007347773 0.0008086189 0.0011188196 -0.0024878651 -0.0024443070 0.0021034058 0.0017373722 -0.0034560891 0.0040664961 -0.0029311224 -0.0031916853 0.0000128846 0.0002605967 0.0068617089 0.0033838282 0.0007563852 -0.0014230840 0.0005772366 -0.0025196861 -0.0010425120 -0.0058116058 -0.0002397566 0.0010542623 0.0015659751 0.0131675186 0.0148659961 -0.0095133839 -0.0128586254 -0.0133911673 0.0151398751 -0.0002027742 0.0005698864 -0.0002298824 -0.0013017691 -0.0031832562 -0.0065898413 0.0011428942 -0.0004002712 0.0034014906 0.0005296554 0.0003582629 0.0011721311 -0.0004332009 -0.0010195834 -0.0020397306 -0.0000123025 -0.0002311731 -0.0005183688 -0.0000324091 0.0001083837 0.0005403520 -0.0011763411 -0.0004020745 0.0003621141 -0.0042953978 0.0045680763 0.0020901316 -0.0000542871 -0.0051432746 0.0008712933 -0.0008556049 -0.0000132868 -0.0009045291 -0.0023735933 -0.0050162953 -0.0070891331 0.0031851298 -0.0011978100 0.0062352058 0.0006571786 -0.0002303061 0.0001915637 0.0044011340 0.0018113504 -0.0021184196 0.0005363265 -0.0000574303 -0.0030473880 0.0035223966 0.0022547031 -0.0039449295 -0.0071767100 -0.0031696569 -0.0036086840 -0.0018319084 0.0012044620 -0.0006718275 0.0007875587 -0.0017703260 0.0002314025 0.0046870351 -0.0043148396 0.0028578371 0.0011365337 -0.0022066671 0.0026976580 0.0045497019 -0.0041621905 0.0042243932 0.0015449766 0.0054114688 -0.0005638845 0.0001803978 0.0014563801 0.0010021645 -0.0008579304 0.0059298077 0.0056599976 0.0024174369 0.0041175436 -0.0048354847 -0.0063027557 0.0016144807 0.0045406843 -0.0037057519 -0.0181442572 -0.0255555839 0.0096782418 -0.0046415685 -0.0100268905 0.0198634550 0.0157748429 0.0221862129 0.0082657992 -0.0036452974 0.0020951590 -0.0179308112 0.0054796461 0.0160245577 0.0016088706 0.0187389992 -0.0077053357 0.0175287217 0.0164119174 -0.0165070999 0.0021003334 -0.0010350446 0.0052203214 0.0092558679 -0.0024602653 0.0207939498 0.0024781416 -0.0005860496 -0.0050052421 -0.0030467998 -0.0030379522 -0.0004830607 -0.0035177429 -0.0015211624 0.0000704191 0.0023275344 -0.0009305642 0.0011339948 0.0065056383 -0.0006615084 0.0024190470 0.0006463211 -0.0005318717 0.0003057020 -0.0030394771 0.0053881941 -0.0012952067 0.0116772240 -0.0017667288 0.0052352960 -0.0065289536 -0.0022040319 -0.0012304179 0.0011863279 -0.0002693252 -0.0005293561 0.0015807859 0.0008612820 0.0001527653 -0.0001007122 0.0002134491 -0.0000209451 -0.0010557298 -0.0006931574 -0.0014625174 -0.0008660632 0.0052620686 -0.0021897590 -0.0376724452 0.0352222632 -0.0227115030 0.0058556591 -0.0048247441 0.0047475610 -0.0031674378 0.0016865459 -0.0010867700 -0.0023277416 0.0032590364 -0.0024592373 -0.0089670869 0.0051943229 -0.0047770040 0.0078264500 -0.0040267086 0.0013338680 -0.0006170756 -0.0007405797 -0.0000616585 0.0209465051 -0.0177091018 0.0112005382 0.0465291690 -0.0409507093 0.0296003078 -0.0578544506 0.0507975972 -0.0340829551 -0.0002157293 -0.0006202254 0.0022591270 0.0014039396 -0.0011332251 -0.0013604982 -0.0023932214 0.0100179465 -0.0094153555 -0.0006186736 -0.0000519593 -0.0024456433 -0.0013441845 0.0002832796 -0.0046999958 0.0044361128 0.0046282313 0.0013575467 -0.0034835877 -0.0038787789 0.0034501973 0.0027459232 0.0027311866 0.0007242955 -0.0016063592 -0.0034428133 0.0023049455 0.0096887644 -0.0001507257 -0.0003792501 -0.0131772623 0.0055395895 -0.0019294591 0.0058521166 0.0007737975 -0.0027666361 -0.0118028814 0.0069042860 -0.0034401005 0.0050867528 -0.0102446892 -0.0021759720 -0.0005154023 0.0002284094 -0.0000600575 0.0079053831 -0.0047474030 -0.0006652032 -0.0050141844 0.0027324354 -0.0008380782 -0.0006763237 0.0005539308 0.0012140029 -0.0006837622 -0.0012099886 -0.0007759229 -0.0006363924 -0.0014021605 -0.0004532908 0.0003921393 0.0008136625 0.0001669332 -0.0001889490 -0.0003229404 -0.0001003163 -0.0001740655 -0.0003141690 -0.0000311897 -0.0001927822 -0.0002495625 -0.0000515385 -0.0001590059 0.0015558980 0.0017800035 0.0017505885 -0.0003238717 -0.0016499316 0.0003234539 0.0004491277 0.0001270112 0.0002305803 -0.0004140145 0.0019260031 -0.0000027828 0.0010284986 -0.0011504382 0.0000233593 0.0002711303 -0.0003161630 0.0002141265 0.0006296324 0.0002411889 -0.0014012164 0.0001016299 -0.0004797008 0.0012406182 -0.0003794220 -0.0008210085 -0.0003334246 0.0006705204 0.0003649799 0.0001587617 0.0004653536 0.0003461730 -0.0010400698 -0.0008579763 -0.0003219954 -0.0013935975 -0.0007433087 0.0001570194 0.0028572301 -0.0018338111 -0.0043205787 -0.0025383838 0.0110456714 -0.0064386500 0.0455592370 -0.0884946779 0.0410937746 -0.0469604988 0.0991821252 -0.0520822642 -0.0015408718 -0.0215926552 0.0152815422 0.0111589445 -0.0203629604 0.0099649021 -0.0123445925 0.0259881392 -0.0097918887 -0.2193220408 0.4868984013 -0.2547781565 0.2485980620 -0.6178933374 0.3424004073 0.0023021017 0.0141508273 -0.0043260912 -0.0294100832 0.1034955175 -0.0522114316 0.0497775237 -0.1237284051 0.0847763361 0.0008712511 0.0009318487 0.0032466263 0.0023140206 -0.0050493620 -0.0069343096 -0.0013959328 0.0007988706 -0.0002431453 0.0029542522 0.0019320033 0.0079876307 0.0005395509 -0.0018878236 -0.0032178195 -0.0028980854 0.0045789884 0.0045636246 -0.0030787088 -0.0046778218 -0.0108788739 0.0005543233 -0.0002525295 0.0001003158 -0.0020253529 0.0066408678 0.0106037246 -0.0042189370 -0.0009530151 -0.0063968309 0.0010215093 -0.0033670476 -0.0059169921 -0.0016283014 -0.0025818174 0.0039386701 -0.0000529581 0.0002464739 0.0009370904 0.0000455857 -0.0002929135 -0.0009412720 0.0035191955 0.0010318574 -0.0001515468 -0.0001547210 -0.0004697570 0.0007490633 -0.0014531228 0.0004596044 -0.0017701459 -0.0009142534 0.0010623379 0.0025954542 0.0029367036 -0.0000886336 0.0114349012 -0.0076396078 0.0003618243 -0.0059485032 -0.0010328168 -0.0015241661 -0.0010108397 0.0010273764 0.0002203539 -0.0002837200 0.0026125905 -0.0020598701 0.0062975524 0.0003432479 -0.0006409366 -0.0019977868 0.0062755607 0.0023429666 0.0040541049 0.0017728441 -0.0011047110 0.0009832744 -0.0003769958 0.0026264585 -0.0006431276 -0.0038806863 0.0040599046 -0.0029260713 -0.0025618590 0.0033101100 -0.0006073507 -0.0053599385 0.0043426400 -0.0013289915 -0.0004346483 -0.0042200138 -0.0005394528 -0.0013957491 -0.0020420339 0.0001700401 -0.0011863312 -0.0044575798 0.0025015161 0.0019278829 -0.0065697530 -0.0025791306 0.0010971956 -0.0038654865 0.0004477766 -0.0072421818 0.0035881977 -0.0070820503 0.0048013604 0.0117832858 0.0142806383 -0.0069878609 -0.0008039826 -0.0143551018 -0.0007990043 0.0024120968 0.0010186050 0.0089136214 -0.0012894211 -0.0046474130 0.0100611684 -0.0012252430 -0.0029211412 -0.0097689851 -0.0073494682 0.0021132680 0.0007218544 0.0005385199 0.0004670879 -0.0020126622 0.0010106578 0.0026512819 -0.0002626873 0.0006165414 -0.0000633552 -0.0005535074 0.0022615950 0.0021018680 0.0011599858 -0.0012266805 -0.0013882556 -0.0002526359 0.0012692450 0.0004298954 -0.0035798923 -0.0004344084 -0.0026150084 -0.0008328308 -0.0003820931 -0.0005326632 0.0015125007 -0.0029584093 0.0005105806 -0.0079147647 0.0003320335 -0.0027352050 0.0058580716 0.0018620975 -0.0006612418 0.0023179075 -0.0016455503 0.0011206241 -0.0037410383 -0.0015342331 -0.0000221440 -0.0013933585 0.0026045765 0.0014634744 0.0002210016 -0.0006327479 -0.0006744651 0.0095231649 -0.0390626384 0.0145915168 -0.0043063261 0.0016016592 0.0023305931 -0.0001230813 0.0006534520 0.0025983079 -0.0011753951 -0.0001818376 -0.0012826681 -0.0030964557 0.0002321308 0.0008463173 0.0020068350 0.0029971008 0.0002641113 0.0005502612 -0.0001576794 -0.0018377929 0.0000743606 -0.0030495083 0.0005828310 0.0019825596 -0.0097431931 0.0024919830 0.0043007496 0.0014891252 0.0003851060 -0.0039550098 -0.0038727451 -0.0068080091 0.0035730742 -0.0009551891 -0.0018418466 -0.0030750288 0.0074926548 0.0006800207 0.0326825012 -0.0821708937 0.0535137919 0.0071374120 -0.0017468979 0.0191603532 0.0293426932 -0.0119768908 0.0959849881 -0.0687268588 -0.0900580189 -0.0249899754 0.0647238630 0.0637041369 -0.0648522589 -0.0285404759 -0.0182588213 -0.0072237493 -0.0044752906 0.0562005945 -0.0252985917 -0.1979714466 0.0602099068 -0.0375212135 0.1991413741 -0.0678534819 0.0049689901 -0.0271803690 -0.0419381099 0.0406161962 0.2052454092 -0.1976644164 0.0710181098 -0.1281281554 0.2339365613 0.0398924217 0.0018371534 0.0008265065 0.0000053860 -0.0317502937 0.0176799281 0.0021055810 0.0029321442 -0.0017134183 0.0004616580 -0.0014430643 -0.0125756684 -0.0073828032 0.0068811033 0.0060422573 -0.0029112572 -0.0011462708 -0.0035193257 -0.0047706722 -0.0005402612 -0.0014761529 -0.0011980492 0.0001426238 0.0009350701 0.0010100358 0.0002478453 0.0016086407 0.0005935146 0.0005966247 0.0016702969 0.0006638509 0.0023079703 -0.0098649040 -0.0090122542 -0.0105857373 0.0035978579 0.0119063067 -0.0000119223 -0.0032431273 0.0025555165 0.0022143342 0.0011975959 -0.0093441192 0.0000770230 -0.0035435681 0.0035785304 -0.0016572400 -0.0026164880 0.0016430509 0.0016429106 -0.0045105055 -0.0012773703 0.0037896981 0.0004107493 -0.0000646653 -0.0056550851 0.0023130950 0.0039066964 0.0015218906 -0.0031134876 -0.0016763751 -0.0008334547 -0.0021546012 -0.0015661215 -0.0046357946 0.0047084766 0.0095746416 0.0000118523 0.0019829590 0.0056320882 -0.0128616545 0.0063936396 0.0186714074 0.0002040184 0.0008310096 -0.0004570043 0.0028617197 -0.0062439763 0.0007789995 -0.0029894124 0.0071786786 -0.0022068053 -0.0006453827 -0.0018997486 0.0014624330 0.0000179398 -0.0007238846 -0.0012604040 0.0005489962 0.0014215828 0.0013983899 -0.0161491282 0.0269938698 -0.0179829422 0.0148650298 -0.0409223405 0.0260394848 -0.0001247372 0.0014395173 -0.0006505389 -0.0019248216 -0.0046625433 -0.0007709263 -0.0014781325 0.0009730251 0.0037914148 -0.0009902674 -0.0012341015 -0.0027677663 -0.0010879231 0.0037047180 0.0048011137 0.0010389678 -0.0003274002 0.0000430894 -0.0026352240 -0.0025318664 -0.0050204642 0.0003735335 0.0024979998 0.0024657573 0.0037190205 -0.0025092925 -0.0049224748 0.0029371749 0.0008177993 0.0100970316 -0.0005603461 -0.0000623217 -0.0000919112 0.0075461154 0.0004018577 -0.0111332156 0.0003166215 -0.0041929018 0.0087095531 0.0001844767 -0.0003780084 -0.0005797893 0.0001359317 0.0000703916 0.0004688666 0.0001132979 -0.0001787567 -0.0008347149 -0.0000101287 0.0003837111 0.0008549469 -0.0002142433 0.0002056343 0.0002600162 -0.0018290341 0.0022403257 0.0008967931 -0.0001467627 -0.0028723643 0.0002774840 -0.0005943658 0.0002975201 -0.0004722119 -0.0009236047 -0.0028730754 -0.0029144383 0.0024265001 0.0003042720 0.0036676252 -0.0003668269 -0.0008644464 -0.0003433431 0.0024082047 0.0009740539 -0.0003650673 0.0019109260 -0.0011688982 0.0022723297 -0.0007256644 0.0027423630 -0.0049228224 -0.0044497998 -0.0018799114 -0.0023547152 -0.0012284213 0.0005134885 -0.0006619745 0.0001752818 -0.0010127311 0.0002659903 0.0028724624 -0.0030862835 0.0017764170 0.0011540526 -0.0013946957 -0.0001583588 0.0020924579 -0.0039933602 0.0024623832 0.0006751803 0.0035937383 0.0000620707 0.0006438101 0.0011541401 0.0003109589 0.0000079734 0.0038937677 0.0006400974 0.0003502565 0.0032649977 -0.0005183643 -0.0495426494 0.0829250172 0.0015150214 0.1288005300 -0.1446666484 0.0389716093 -0.0704351837 -0.2621317803 -0.3347565599 0.2097973007 0.0704485213 0.3665380292 0.0482098995 -0.0540832632 -0.0022243039 -0.3228757035 -0.0109184789 0.1167979011 -0.1339917347 0.1153655212 0.0024730242 0.2468611256 0.2037238344 -0.1065162360 0.0039011657 0.0034460137 -0.0007938720 -0.0119677316 0.0029647248 0.0041577347 -0.0008951032 0.0004281407 0.0006205706 -0.0036627419 0.0050675400 0.0052081223 0.0014438226 -0.0015858560 -0.0021261495 0.0010482740 0.0017069923 0.0018068449 -0.0067232121 -0.0030795504 -0.0055139698 -0.0013855074 -0.0004627620 -0.0009801521 0.0027623373 -0.0052185245 0.0009571963 -0.0146102336 0.0008246223 -0.0045457652 0.0092040346 0.0031699003 -0.0011604581 0.0054646146 -0.0041866774 0.0010679208 -0.0025768225 -0.0006157581 0.0010793234 -0.0032913581 0.0066059725 0.0042782834 -0.0031032961 -0.0054885856 -0.0047363466 -0.0133030772 0.0656461057 -0.0342636325 -0.0052349704 0.0047326997 -0.0053810702 0.0008896959 -0.0013483056 -0.0006390439 -0.0009463839 0.0052601464 0.0051354959 0.0052431823 0.0009425658 -0.0047610323 -0.0066023634 -0.0045774178 -0.0017732957 0.0013685240 -0.0024758303 0.0028715675 -0.0008804162 0.0019514314 -0.0002107302 0.0035141979 0.0049873241 -0.0055802367 0.0061266788 -0.0156549897 0.0044853157 -0.0188454357 0.0125102056 -0.0075927947 -0.0000695723 0.0010303373 0.0073897722 -0.0057734577 -0.0101923055 -0.0101480273 -0.0132602013 0.0622388631 -0.1192760150 0.0017196798 -0.0044259214 0.0070412054 0.0272076370 -0.0075924069 0.1089418854 -0.0801785958 -0.1039831541 -0.0300750062 0.0847917302 0.0789805834 -0.0759395957 -0.0209454514 -0.0165429335 -0.0028926794 -0.0077207760 0.0571885748 -0.0188124780 -0.2251481608 0.0633609019 -0.0443809731 0.2454934842 -0.0471447185 0.0266791578 -0.0395092282 -0.0223307384 0.0612363581 0.2111134921 -0.1978374645 0.0890853595 -0.1237824580 0.2265386063 0.0567222565 -0.0004947161 0.0005887311 0.0016364562 0.0255685913 -0.0144696548 -0.0031265807 0.0046902166 -0.0022396708 0.0005870907 0.0006960729 0.0107238139 0.0101294914 -0.0106113378 -0.0048377690 0.0022034177 0.0003140892 -0.0027795515 0.0029227606 0.0002504818 0.0035315782 0.0013170725 0.0002663661 -0.0013551861 -0.0010884577 0.0009731528 -0.0027481490 -0.0011113717 -0.0006447461 -0.0019363582 -0.0005655048 -0.0019581578 0.0127050736 0.0129308942 0.0149967798 -0.0049704915 -0.0150709592 0.0000197273 0.0042387530 -0.0036349966 -0.0029309698 -0.0016228563 0.0118187480 -0.0005266726 0.0037984926 -0.0020474763 0.0072210740 0.0026826618 0.0044735134 -0.0031357942 0.0041417412 0.0011068799 -0.0117928261 0.0013800837 -0.0029315665 0.0073911930 -0.0024859219 -0.0059692394 -0.0012346629 0.0032949370 0.0012160997 0.0008412116 0.0021424428 0.0016345605 0.0019581027 -0.0079765407 -0.0129982439 -0.0026276048 -0.0038530260 -0.0048108408 0.0182510497 -0.0092864377 -0.0295444642 0.0035491124 0.0008128288 -0.0006198987 0.0002542325 -0.0016277732 -0.0010506857 -0.0025110386 -0.0000434311 -0.0017830986 0.0006769924 -0.0006726311 0.0005184146 -0.0019655451 0.0020675178 0.0007764378 0.0010444604 -0.0006105225 0.0016207779 -0.0052237923 0.0018859718 -0.0048125644 -0.0017685288 -0.0106653503 0.0070695522 -0.0005122623 0.0008077676 -0.0002988346 -0.0003512791 -0.0135217674 0.0071731757 -0.0056892896 0.0093959156 -0.0020383555 -0.0000727709 0.0000897616 -0.0021284637 -0.0027620673 0.0033013458 0.0054534378 0.0013568006 -0.0008460267 0.0002754306 -0.0017935674 -0.0004544028 -0.0063573894 -0.0010784978 0.0005424497 0.0024957563 -0.0012734147 -0.0054242058 -0.0007499960 0.0028766551 0.0091870681 0.0036354523 -0.0002805060 0.0003750550 -0.0000693965 -0.0033158770 -0.0086115683 -0.0049961942 0.0049583637 0.0049291325 0.0013351134 0.0001557354 -0.0001416963 -0.0001269552 0.0000398380 -0.0000098659 0.0001522792 -0.0000383666 -0.0001093238 -0.0002422212 -0.0000548379 -0.0000177817 0.0002984397 -0.0016810674 -0.0001320992 0.0008276955 -0.0057368886 0.0060339079 0.0032699291 -0.0002335067 -0.0067724836 0.0009535141 -0.0009258843 -0.0006707204 -0.0015753211 -0.0038941086 -0.0064488354 -0.0077895813 0.0043836749 -0.0030490735 0.0089706946 -0.0000265605 0.0000075710 -0.0009204999 0.0066448851 0.0027681485 -0.0016412770 0.0053045416 -0.0005962293 0.0034617474 0.0003451596 0.0056336469 -0.0116500216 -0.0088073489 -0.0043143224 -0.0044111417 -0.0021258787 0.0007959121 -0.0010709557 0.0001818180 -0.0006761661 0.0007551667 0.0061149103 -0.0059273376 0.0028249448 0.0039256479 -0.0016239360 -0.0021307581 0.0016572882 -0.0076879145 0.0085233935 0.0018300954 0.0077737185 -0.0003317953 0.0001950627 0.0015279080 0.0010963096 -0.0003511982 0.0083918932 0.0051044098 0.0031184529 0.0036579401 -0.0052360459 0.0460164557 -0.0783402398 -0.0018193993 -0.1217601020 0.1341156519 -0.0392333392 0.0643189738 0.2437529333 0.3126776993 -0.1975394493 -0.0671877448 -0.3442905858 -0.0443003125 0.0547258738 0.0025487327 0.3162845273 0.0054306204 -0.1201870988 0.1364809814 -0.1064650721 -0.0057885664 -0.2434226381 -0.2008245904 0.1019617679 0.0453372169 0.0400900393 -0.0138026063 -0.1025295598 0.0190829435 0.0602632982 -0.0075634458 -0.0021240844 -0.0012253588 -0.0589403805 -0.0108925384 0.0147975397 -0.0315548302 -0.0065753503 0.0154507635 0.0268894794 -0.0218259326 0.0163866454 0.0448245299 -0.0368627280 0.0059040603 0.0060990011 0.0000489636 0.0013779412 -0.0237181890 0.0430282531 -0.0104770553 0.0940553497 -0.0096610152 0.0480556241 -0.0427204872 -0.0122663956 -0.0156530829 0.0428692855 -0.0307972801 -0.0149250943 -0.0004169016 0.0019617464 -0.0009100832 -0.0021995360 0.0038469518 -0.0027466253 0.0029980826 0.0021848968 -0.0029419364 -0.0004080267 0.0062116912 -0.0064720124 -0.0021350837 0.0009901532 -0.0010378511 0.0003416007 -0.0002914084 -0.0001210815 0.0002436378 0.0000369310 0.0005754298 0.0005729131 -0.0001969782 -0.0005892662 -0.0011388023 0.0005235202 -0.0001228452 0.0010382387 -0.0008371656 0.0006397620 -0.0004036781 0.0004448298 0.0001067925 -0.0003237439 0.0004080962 -0.0012223813 0.0038457261 -0.0037207196 0.0034764706 -0.0032205010 0.0031397687 -0.0013293003 0.0000250272 -0.0011640200 0.0005464812 -0.0005881139 0.0008630164 -0.0010157512 0.0023521116 -0.0056153161 0.0017496295 0.0003569432 0.0000474712 0.0015516999 0.0006436990 0.0017429615 0.0091189662 -0.0075862256 -0.0080066264 -0.0028165020 0.0084233469 0.0041930245 -0.0061207284 -0.0019909322 -0.0015046019 -0.0005531710 0.0010303858 0.0025623855 -0.0013519752 -0.0159435580 0.0010691467 -0.0029446618 0.0095878464 0.0058560025 -0.0043395722 -0.0031015593 -0.0025843409 0.0050353791 0.0086982276 -0.0045091772 0.0039151120 -0.0014926724 0.0057663239 0.0085684197 0.0003248592 -0.0001697322 0.0003595898 -0.0052216866 0.0067497441 -0.0008230372 -0.0504374721 0.0357056548 -0.0133590967 -0.0002065964 -0.0012011960 0.0005700111 -0.0011199380 -0.0006368438 -0.0004457690 -0.0004814817 -0.0014449484 -0.0002984684 0.0011258131 0.0012665560 -0.0003660553 -0.0007498423 -0.0006854050 0.0002814719 -0.0009348413 -0.0010411781 0.0002065768 -0.0005471964 -0.0005575138 0.0002015663 0.0000531938 0.0007460523 0.0010286170 0.0009604758 -0.0001940134 -0.0008393497 0.0003928864 -0.0011560945 0.0017163612 -0.0000365300 -0.0008254099 0.0037643482 0.0008381780 0.0027463235 -0.0046786604 -0.0012991806 -0.0007887591 -0.0004699989 0.0050077463 0.0040364182 0.0018189152 -0.0050987717 0.0003785664 -0.0005982817 0.0015839950 -0.0005755174 -0.0013861973 -0.0008592731 0.0019659532 0.0009973009 -0.0007408315 0.0019298701 0.0015883180 -0.0003923739 -0.0005280266 -0.0007276663 -0.0003673877 -0.0006022678 -0.0001337869 0.0015684531 -0.0009752334 -0.0025331891 0.0602879485 0.0186628800 -0.0162366500 -0.0083187773 0.0333569118 0.0584311652 -0.0438547638 -0.0722357447 -0.0885611371 0.0272706970 0.0050885502 -0.0050866072 -0.0278426706 0.0604393883 0.1014950890 -0.0130778965 -0.0494356132 -0.0505602935 0.0964766769 0.0620335757 0.0925006132 0.0345356766 -0.0518450685 -0.1859947263 -0.0102210286 -0.0011210955 0.0025031928 0.1148302742 0.0550160541 0.1762946087 0.0332070060 0.0159244001 -0.1551102768 0.0182924489 0.0285709780 0.1049462203 0.0287666917 -0.0791917445 -0.1342138762 -0.0316183301 0.0149114137 -0.0054294811 0.0460717840 0.0508754735 0.1429366800 0.0057579756 -0.0619518478 -0.0920421223 -0.0736769803 0.1840660077 0.1370118327 -0.1706881669 -0.0722599204 -0.2606574101 0.0116998244 -0.0042457391 0.0018849299 -0.1413794361 0.1580109252 0.2395038231 -0.1035396611 0.0140751291 -0.2222314241 0.0023638066 0.0020608417 0.0136532300 -0.0039880230 -0.0031256750 -0.0137768567 0.0003052302 0.0035220849 0.0166584074 0.0019606823 -0.0059392440 -0.0161871245 -0.0206360271 -0.0034829737 0.0137285216 -0.0454500603 0.0243450509 0.0303818701 -0.0232461707 -0.0211157416 -0.0244626969 0.0357637838 -0.0473085294 0.0333152385 0.0337772328 -0.0332891727 0.1824092123 -0.1719550919 -0.0815687300 -0.2292771495 0.0324693555 0.0381115679 0.0295432923 0.0165824287 0.0325165008 -0.0742307452 -0.1347006079 0.0705218736 -0.1852261108 0.2162773813 0.0091975541 0.2519047927 0.0371417114 0.0026698801 0.0272184862 0.0162953593 -0.0093986726 0.0097844940 -0.0057237645 0.0388311183 0.0068572384 -0.0145464009 0.0293438394 -0.0344732367 0.0465886428 0.0361464935 -0.0569406881 -0.0859918585 0.0420074158 0.0817178063 0.0062366443 -0.0146716469 -0.0084955734 -0.0292478772 -0.0290587334 0.0071678239 0.0043830693 -0.0168457332 0.0775237206 0.0500202733 -0.0967882098 -0.0833666215 -0.0013738205 0.0027618175 -0.0001999962 0.0046551301 -0.0041517366 0.0026381057 -0.0032086293 -0.0085104188 -0.0105916593 0.0055239957 0.0011376713 0.0110631461 0.0013027019 -0.0002337282 -0.0000310586 -0.0038059443 -0.0009300578 0.0003260896 -0.0000225254 0.0017101215 -0.0004157432 0.0035595643 0.0031999293 -0.0020387725 -0.0042464083 -0.0064257909 0.0040421885 0.0274313031 -0.0074165952 0.0070021293 -0.0013775411 -0.0003322566 -0.0062346579 0.0142672477 -0.0010388608 0.0041937765 0.0047767944 0.0020323520 -0.0046763125 -0.0066426318 0.0068086295 -0.0033819521 -0.0091267592 0.0078712225 -0.0034613146 -0.0020961144 -0.0005394868 0.0002731196 0.0041909542 -0.0074425736 0.0017275682 -0.0172875240 0.0013030405 -0.0110895379 0.0096718278 0.0025239463 0.0032983635 -0.0076039709 0.0054549427 0.0029714374 -0.0005581460 -0.0005328927 0.0000346298 0.0005843352 -0.0011767836 0.0002509916 -0.0001607665 0.0001876521 0.0011614271 -0.0002968769 0.0000500210 0.0004583296 0.0002428188 -0.0000824216 0.0002440156 -0.0000649997 0.0000927835 0.0001034262 -0.0001104623 0.0000789213 -0.0000904585 -0.0000557445 0.0000272873 0.0001184723 0.0001742321 -0.0000942043 -0.0000249666 -0.0001210066 0.0000900983 -0.0001479856 -0.0000026584 -0.0001766264 -0.0000404059 -0.0002171304 0.0000251453 0.0000047961 -0.0005784795 0.0005503925 -0.0006015702 0.0001916108 -0.0005253991 -0.0001062102 0.0001386320 0.0001428142 0.0000041240 -0.0000550562 -0.0001655340 0.0000417092 0.0001389661 -0.0004379314 -0.0000209064 -0.0000042473 -0.0000529177 -0.0001743598 0.0001839512 -0.0004130291 -0.0005507049 0.0004222031 0.0003683082 0.0001794825 -0.0005098434 -0.0000362991 0.0003318461 -0.0000746970 0.0001523888 0.0000222058 -0.0001322154 0.0001190605 0.0000090924 0.0005372538 0.0001774996 0.0003442773 0.0004343318 -0.0009338266 0.0009542696 0.0004425376 -0.0007270166 0.0003388414 0.0006380139 -0.0007598702 0.0003241813 -0.0008716357 0.0014229192 -0.0010363083 0.0000261061 0.0001287550 -0.0000454742 0.0006335053 -0.0016046807 0.0001066021 0.0115088867 -0.0091926343 0.0036593736 0.0001174244 0.0002715211 -0.0001723836 0.0001693165 0.0002773714 0.0003124627 0.0002251363 0.0005444264 0.0001658494 -0.0003459876 -0.0004240411 0.0001294098 0.0002268083 0.0002217114 -0.0000668145 0.0003730620 0.0002763701 -0.0000888270 0.0001290052 0.0001706864 -0.0000759673 -0.0000116943 -0.0002318525 -0.0003297627 -0.0002821192 0.0000081793 0.0002089779 -0.0001412022 0.0003827656 -0.0005394001 0.0000108131 0.0002699253 -0.0012241406 -0.0002311190 -0.0008189459 0.0013762623 0.0005647029 0.0002625926 0.0003107466 -0.0020716175 -0.0012630614 -0.0005929645 0.0013350055 -0.0000532405 0.0001298119 -0.0004641268 0.0001518177 0.0004600453 0.0001593659 -0.0005312929 -0.0001621019 0.0003360304 -0.0006543125 -0.0005352222 0.0003757349 0.0001512322 0.0000004347 0.0003340121 0.0001912647 -0.0001279198 -0.0005768291 0.0004053300 0.0009004628 -0.0084335166 -0.0016382929 0.0019325804 0.0016707742 -0.0068570478 -0.0105094634 0.0057966493 0.0116829047 0.0140755222 -0.0045855077 -0.0009616529 0.0010690728 0.0039816373 -0.0095833622 -0.0163429099 0.0024942189 0.0080966500 0.0092858888 -0.0188384375 -0.0081903373 -0.0187587786 -0.0085935433 0.0053194189 0.0340766118 0.0017666722 0.0002543094 -0.0004603480 -0.0200915767 -0.0112824695 -0.0279500887 -0.0081176216 0.0001291690 0.0265372856 -0.0061025914 -0.0101346946 -0.0367691908 -0.0073702514 0.0234701506 0.0422925827 0.0101732180 -0.0047478068 0.0018024036 -0.0130473914 -0.0169779943 -0.0442196518 -0.0017272250 0.0215002560 0.0320134101 0.0261750096 -0.0663298890 -0.0483156154 0.0635472572 0.0196577449 0.0878887718 -0.0037664424 0.0013464948 -0.0005938587 0.0529271584 -0.0556761007 -0.0776840415 0.0368402265 -0.0054983033 0.0785684893 -0.0003269791 -0.0003481909 -0.0023576876 0.0006816803 0.0005098773 0.0022759754 -0.0002174094 -0.0010245382 -0.0052453566 -0.0007222435 0.0019249892 0.0050283552 0.0039862527 0.0030549388 0.0037798395 0.0007682084 -0.0069278218 -0.0143448708 -0.0273520587 0.0062838253 -0.0408065309 0.0448060400 -0.0195032072 0.0672745897 0.1092709758 -0.0200801935 0.2691061909 -0.2318626206 0.0137638889 -0.3925078151 0.0373361161 -0.0000730877 0.0707953923 -0.0494745424 0.0119371934 -0.0908176146 -0.3121828923 0.0577233080 -0.3681556985 0.3022445699 -0.0334042292 0.4993291734 -0.0098364070 -0.0001901898 -0.0040462353 -0.0040512809 0.0008859263 -0.0033790206 0.0067092438 -0.0106394552 -0.0134901421 -0.0033595426 -0.0091413463 0.0253656331 -0.0687756194 -0.0015682834 0.0778354702 0.0725288855 -0.0242575929 -0.1070700223 -0.0062616999 0.0062836363 0.0094861114 0.0163050249 0.0090121746 -0.0134702788 0.0171748383 0.0052241770 -0.0682301212 -0.0518770517 0.0357015783 0.0910492645 0.0007553851 -0.0009927961 -0.0000235114 -0.0014535252 0.0020864088 -0.0000362303 0.0008468426 0.0032967404 0.0042513888 -0.0026539652 -0.0009683953 -0.0046402894 -0.0007315641 0.0004457675 -0.0002167090 0.0042521228 0.0008327925 -0.0008558993 -0.0000459388 -0.0017206030 0.0006403480 -0.0024841070 -0.0023186357 0.0015635738 -0.0014157186 -0.0016071020 0.0010082263 0.0075963436 -0.0024937053 -0.0005967234 0.0001259889 -0.0007029819 -0.0011625776 0.0061680731 -0.0017492059 -0.0015935561 0.0036204578 0.0020494109 -0.0016173446 -0.0009509091 0.0041312401 -0.0031190727 -0.0067979413 0.0008426292 0.0069497769 0.0002262657 -0.0025821345 -0.0045845336 -0.0039252885 0.0019433702 0.0008194643 -0.0080214698 -0.0025474488 0.0051178342 0.0017488745 0.0001477425 0.0011023457 -0.0045158643 0.0030038441 0.0012814313 0.0005621414 -0.0001232317 0.0001398933 0.0000768141 -0.0001248013 0.0003834857 -0.0004263795 -0.0005115345 -0.0000962631 0.0002381137 -0.0008392066 0.0006602086 0.0007444129 -0.0005751138 0.0003917400 -0.0001148756 0.0000611943 -0.0000396969 0.0000334622 -0.0000897986 -0.0000215262 -0.0000704996 0.0000157780 0.0000506105 0.0002930659 -0.0001778783 0.0001140349 -0.0003156163 0.0002722495 -0.0001492685 0.0001032973 -0.0000256912 -0.0000008911 0.0001121891 -0.0000629819 0.0001750400 -0.0012258858 0.0011033898 -0.0009449720 0.0018758542 -0.0013842537 0.0010358583 -0.0001134573 0.0001510286 -0.0001033727 0.0001136767 -0.0000935191 0.0001830931 -0.0007293507 0.0018742686 -0.0008565606 -0.0000411122 -0.0000054800 -0.0001486094 -0.0001750755 -0.0000452934 -0.0011056278 0.0008987781 0.0010339733 0.0003178192 -0.0011060016 -0.0004334640 0.0007331888 0.0003868320 0.0000068670 0.0000976089 -0.0000711380 -0.0004045011 0.0001933117 0.0022588500 -0.0004596209 0.0003076313 -0.0009246189 -0.0011156732 0.0005758380 -0.0002978552 0.0014783623 -0.0011635936 -0.0015227722 0.0010137812 -0.0007052067 0.0006333379 -0.0014498593 -0.0008195027 -0.0000794980 -0.0000429105 -0.0000583807 0.0006067452 -0.0003510329 0.0001272456 0.0004766152 -0.0009092816 0.0007752499 -0.0000560202 0.0001946645 -0.0000349617 0.0001875285 -0.0000207947 -0.0000887319 -0.0000250191 -0.0000025533 -0.0000527847 -0.0001174486 -0.0000759087 0.0000672895 0.0000733907 0.0000619039 -0.0000765275 0.0001311685 0.0001171367 -0.0000314964 0.0000619244 0.0000536668 -0.0000507277 -0.0000144489 -0.0000207866 -0.0000161161 -0.0000329651 0.0000384198 0.0000424291 0.0000384603 0.0001652751 -0.0001478105 0.0000918356 0.0000753525 -0.0004399760 -0.0001589058 -0.0003250531 0.0006126665 0.0001574125 0.0000649453 0.0000392898 -0.0006278068 -0.0006640367 -0.0002774378 0.0003161678 0.0000596173 -0.0000695227 -0.0000901911 0.0000477794 0.0000731264 0.0001064948 -0.0002333073 -0.0001448665 0.0000745909 -0.0001664209 -0.0001669246 -0.0001896812 0.0000206589 0.0002051379 -0.0001566628 0.0000136231 0.0001192229 0.0000200270 -0.0000470472 0.0000042152 -0.0046276183 -0.0019602478 0.0016885064 0.0008306116 -0.0067452431 -0.0141201011 0.0052432091 0.0099334821 0.0152704318 -0.0049116813 -0.0007012540 0.0008830450 0.0026507701 -0.0102563785 -0.0157806601 0.0029480677 0.0104470746 0.0116738393 -0.0209609779 -0.0230533509 -0.0184949179 -0.0182746643 0.0138865196 0.0338245447 0.0018721616 0.0000681254 -0.0004223812 -0.0294209029 -0.0144617646 -0.0301475260 -0.0099913502 -0.0003852966 0.0342669796 -0.0039187387 -0.0069168042 -0.0223171588 -0.0010219799 0.0096834352 0.0203033339 0.0052120541 -0.0024574159 0.0010785393 -0.0045312741 -0.0091734078 -0.0206532410 -0.0010356112 0.0123983747 0.0192897553 0.0184198393 -0.0390038111 -0.0314012480 0.0429567614 0.0036619641 0.0512707633 -0.0019555067 0.0007313708 -0.0003279747 0.0347178048 -0.0346731392 -0.0398554653 0.0249991540 -0.0024561246 0.0479914960 -0.0002670336 -0.0002796841 -0.0023382152 0.0008309696 0.0005881805 0.0022711928 -0.0002683823 -0.0004260975 -0.0026319351 -0.0004760603 0.0009928415 0.0023854573 0.0019353970 -0.0002519872 -0.0001696859 0.0033872720 -0.0035998449 -0.0056415577 -0.0020170561 0.0055459438 -0.0052132736 0.0053378320 0.0006519069 0.0097651705 0.0180387874 0.0018729409 0.0306604316 -0.0269341517 0.0113943992 -0.0532385644 0.0079610165 -0.0019514077 0.0141540471 -0.0145180398 -0.0017338268 -0.0114626524 -0.0497811863 0.0071243965 -0.0676155426 0.0426177529 -0.0125670347 0.0832699533 0.0062200093 -0.0054441833 -0.0108941718 0.0018474103 0.0030029652 0.0041289176 -0.0375363203 0.0199368640 0.0795672126 0.0448386513 0.0077799333 -0.0997955704 0.3677764188 -0.0306400927 -0.4101901199 -0.3116631816 0.0700631347 0.5205915388 0.0254498390 -0.0070417265 -0.0337466543 -0.0521702723 -0.0166066818 0.0588321403 -0.0700813578 -0.0007025669 0.2477868458 0.2037492007 -0.0775120861 -0.3656269787 -0.0001100240 -0.0001855876 0.0000820479 -0.0004525853 -0.0002028721 -0.0008534481 0.0004145040 0.0003549662 0.0003438196 0.0001621768 0.0003254253 -0.0001704275 0.0001649592 -0.0002268253 0.0001743817 -0.0018158511 -0.0003199208 0.0004878822 0.0001440005 0.0008162583 -0.0004051333 0.0005620947 0.0005433955 -0.0004901916 0.0075120202 0.0038298453 -0.0020204520 -0.0067984588 -0.0076979801 0.0007339230 0.0008961564 -0.0086436468 -0.0014543592 0.0047225096 0.0315709875 0.0122478913 0.0149624774 0.0164952697 -0.0085447450 -0.0057823521 -0.0105197541 -0.0006399302 -0.0324490298 -0.0120023350 -0.0162023449 0.0015044978 0.0091767461 0.0006174237 0.0220009195 -0.0332612078 0.0077905627 -0.0621107967 0.0166474875 -0.0250010565 0.0296675498 0.0121362161 0.0057756497 0.0029505086 -0.0053705616 0.0026359987 -0.0037190365 -0.0007107588 -0.0002683392 -0.0007278588 0.0016452880 0.0017280559 -0.0018390751 -0.0022009195 0.0004338277 0.0002988171 -0.0010292394 0.0000303650 0.0039922252 -0.0051323538 0.0044166527 -0.0011941566 0.0007479436 0.0002809653 -0.0003924526 -0.0003064503 -0.0002971750 -0.0004683273 -0.0000988897 0.0005337971 0.0027962748 -0.0008973217 0.0008736367 -0.0020884090 0.0017093539 -0.0017613736 0.0005031011 -0.0006163921 0.0000389590 -0.0020485595 -0.0005057908 -0.0008727174 -0.0105572993 0.0103502066 -0.0071635823 0.0125487925 -0.0138798079 0.0048786070 0.0004243000 0.0006123501 -0.0003149812 -0.0005933327 0.0004495961 0.0003142563 0.0037250762 -0.0119688304 0.0095466480 0.0004492996 -0.0000592924 0.0002076445 0.0006541036 -0.0009609488 -0.0017374323 0.0000964045 0.0012667915 0.0002024896 -0.0012002651 0.0001735519 0.0009182772 -0.0011833704 -0.0006092040 -0.0001685319 0.0007482856 0.0005730662 -0.0003422870 0.0028367035 -0.0033246129 0.0027273269 0.0009929966 -0.0017220729 0.0027516832 -0.0022046159 -0.0010486514 0.0022193916 0.0025690967 0.0006962487 0.0016090403 -0.0014959956 0.0049388695 -0.0034650635 0.0003826157 0.0003433939 0.0001592850 -0.0044048813 0.0006816955 0.0004076576 0.0158938754 -0.0010287474 -0.0023106126 0.0003907644 -0.0005886544 -0.0004267368 -0.0003250612 0.0005435977 0.0007327706 0.0003660329 0.0008044134 0.0003744151 0.0002303943 -0.0002692537 -0.0003388521 -0.0001694299 0.0000101927 0.0002370123 -0.0006763914 -0.0001252184 0.0000787957 -0.0000143540 -0.0000149451 0.0001569908 0.0001771607 -0.0005268359 -0.0007530409 -0.0006034122 0.0000040686 0.0004799112 -0.0003254682 -0.0010673422 0.0005225319 -0.0006395644 0.0000247560 0.0004248544 0.0006326905 0.0004655575 -0.0016876807 -0.0010187086 -0.0004406435 -0.0002710499 0.0033986673 0.0026720189 0.0010354539 0.0008384407 -0.0006639285 0.0011828548 -0.0006958403 0.0001069835 0.0004493058 -0.0000278785 0.0002562667 0.0001053010 -0.0006585176 0.0005936747 0.0005027732 0.0011681761 0.0003191599 -0.0004034147 0.0011402884 0.0003924916 -0.0005187162 -0.0012123319 0.0008937764 0.0019037971 -0.0152716046 -0.0131080090 0.0102040652 0.0050052980 -0.0577935655 -0.1275267163 0.0344692795 0.0718136850 0.1219774599 -0.0403105716 -0.0050099040 0.0068612714 0.0146914853 -0.0830400188 -0.1201575399 0.0256598124 0.0927336887 0.1035292678 -0.1844882836 -0.2253751077 -0.1589891422 -0.1881019122 0.1256659103 0.2797409228 0.0153051565 0.0002106826 -0.0033769537 -0.2726518617 -0.1270099040 -0.2449769443 -0.0937890145 -0.0029198635 0.3095587643 0.0166212256 0.0314360287 0.1083457705 -0.0003184793 -0.0356401160 -0.0869536084 -0.0230824600 0.0103291375 -0.0047097912 0.0147010545 0.0430986237 0.0846312498 0.0034358589 -0.0612479998 -0.0920325717 -0.0830779304 0.2041217004 0.1475627465 -0.2187516616 -0.0102215848 -0.2351645712 0.0086254933 -0.0030067471 0.0013577468 -0.1809235627 0.1652974127 0.1797255867 -0.1182126055 0.0197890502 -0.2384035714 -0.0016562843 -0.0020690004 -0.0183210529 0.0070399154 0.0047491499 0.0174671763 0.0015075703 0.0014793236 0.0109214015 0.0023510030 -0.0043554497 -0.0097403220 0.0015061477 0.0010923215 -0.0005856149 -0.0118499537 0.0193803159 0.0037299779 -0.0050710661 -0.0197217964 -0.0042172024 0.0007226936 0.0050085749 0.0098489486 0.0164416839 -0.0252241644 0.0168361280 -0.0200133719 0.0169510108 -0.0405698788 0.0035266788 -0.0099735861 0.0112695976 0.0062622798 0.0054739868 -0.0180106806 -0.0398147931 -0.0030938371 -0.0598446527 0.0481634462 0.0030513568 0.0536589164 -0.0394799838 -0.0175006485 -0.0221188895 -0.0083879680 0.0046436581 -0.0043630511 -0.0001838986 -0.0106082564 0.0019368665 0.0252973335 -0.0264315839 0.0162855829 0.0086738171 -0.0141830703 -0.0015674540 0.0220869182 -0.0330337545 0.0188308435 0.0032557253 0.0290146405 0.0003072278 0.0053068756 0.0113868750 0.0012482750 -0.0063596019 0.0318402336 -0.0036416162 -0.0036393082 0.0378110765 -0.0017414762 0.0004605961 0.0011774300 -0.0004239070 0.0028855670 0.0008606278 0.0051677128 -0.0022112541 -0.0028703947 -0.0030771108 0.0001387162 -0.0014001574 0.0024371333 -0.0007390008 0.0004144237 -0.0009985789 0.0057964381 0.0016418555 -0.0010984156 -0.0030530275 -0.0034139148 0.0024876132 -0.0005210487 -0.0009506455 0.0018447808 0.0160364202 0.0131608813 -0.0052716034 -0.0339994369 0.0061401948 0.0169275553 -0.0002291664 -0.0014721607 -0.0002342618 -0.0151946856 -0.0063911748 0.0029956402 -0.0076357509 0.0000215729 0.0039329581 0.0085594724 -0.0021121292 0.0044902476 0.0111728085 -0.0123837390 0.0016762126 -0.0005585307 -0.0016599681 -0.0004921203 -0.0106175490 0.0165294307 -0.0042429209 0.0320009754 -0.0053219325 0.0153770361 -0.0099512659 -0.0033561893 -0.0051093449 0.0113132877 -0.0082809960 -0.0038195264 -0.0026331296 0.0001479818 0.0016486708 -0.0008972558 0.0018694293 -0.0010181573 -0.0001606996 -0.0011344648 -0.0038086649 0.0073312478 -0.0245085117 0.0079453093 -0.0015025130 -0.0028336398 0.0033606739 -0.0006888928 0.0005140834 0.0012058299 -0.0012638433 0.0027479068 0.0041247552 0.0020851994 0.0003319963 -0.0028627402 -0.0011281567 -0.0020144984 0.0000828185 0.0002504191 0.0001627693 -0.0011982519 -0.0002962266 -0.0003641195 0.0005604410 0.0004649404 -0.0015899568 -0.0050375558 -0.0031275896 -0.0004906483 -0.0008321988 -0.0005055783 -0.0076989354 -0.0038812380 0.0009356986 0.0026095336 0.0018298840 -0.0062744601 0.0032162300 -0.0033619681 0.0162479438 -0.0538658817 0.0303023152 0.0084109398 -0.0092750984 0.0067624743 -0.0425954905 0.0634436619 0.0168186766 -0.0120176421 -0.0113086707 -0.0107943640 -0.0351589193 0.0787123559 -0.0350225646 0.0707816486 -0.0858476449 0.0204897910 0.0113218375 -0.0271102358 0.0066768312 0.0145584419 -0.0387162517 -0.0206548611 0.3187664685 -0.4595186139 0.0551355597 -0.3389721136 0.5190247253 -0.1436701369 -0.1223287906 0.1326821271 -0.0494781443 0.2119993912 -0.3249148386 0.1119603280 0.0004711559 0.0009715317 0.0003329433 0.0065873968 -0.0057652221 -0.0004387672 -0.0134745973 0.0075018970 -0.0023526145 0.0047227695 -0.0055302760 0.0004648335 -0.0026710723 0.0044861930 0.0053764574 0.0028983822 0.0029897637 0.0013892531 -0.0016073176 -0.0012790822 -0.0007532625 0.0004882106 0.0004996150 -0.0001867366 0.0026260269 -0.0003355640 0.0011776931 0.0007537948 0.0002435716 0.0002492451 0.0001365922 -0.0023480677 -0.0024740358 -0.0026649025 -0.0005498852 0.0009377036 -0.0007441863 -0.0010961047 -0.0006272648 -0.0018306899 0.0005838828 -0.0005678892 -0.0002817285 -0.0013382677 0.0023029888 -0.0015313367 0.0004430256 -0.0070292382 0.0088284140 0.0001645424 0.0012028763 -0.0168278098 0.0056003754 0.0020207313 -0.0026933968 0.0009128326 0.0005985959 0.0014751291 -0.0011242294 -0.0017322861 -0.0010924305 -0.0007418202 -0.0003441436 0.0074926499 0.0015670985 -0.0034289975 0.0085629890 0.0013464943 -0.0053575490 -0.0068088040 0.0052091181 0.0105868505 0.0158624754 0.0035056282 -0.0033181884 0.0004887875 -0.0085465750 -0.0177004507 -0.0049875856 0.0009695955 0.0066599495 -0.0036741220 -0.0006512621 0.0010169053 -0.0043994908 -0.0062756436 -0.0028797040 0.0034185148 0.0122209978 0.0142258309 -0.0313289378 -0.0349443861 -0.0245662414 -0.0374155393 0.0039982592 0.0325189017 0.0015163801 0.0004619889 -0.0001927404 -0.0437506291 -0.0156418246 -0.0179737361 -0.0193332284 0.0003047655 0.0482470050 -0.0024191049 -0.0048797882 -0.0155091785 0.0048574651 -0.0017663399 0.0050595037 0.0018367953 -0.0007911256 0.0004769277 0.0033060238 -0.0049835152 -0.0028312830 -0.0006527740 0.0083539191 0.0133521474 0.0152556769 -0.0327258710 -0.0233348314 0.0395677008 -0.0085416586 0.0301096930 -0.0008440659 0.0003029199 -0.0001748425 0.0336765136 -0.0270267850 -0.0164957834 0.0223055066 -0.0020746873 0.0370137448 0.0002291024 -0.0000264335 -0.0017152122 0.0008469513 0.0003380103 0.0011628036 -0.0003687863 0.0000342976 -0.0009455490 -0.0004037356 0.0004781236 0.0007080658 -0.0063926835 -0.0015113874 0.0031903425 -0.0118148137 0.0037860396 0.0092273613 -0.0033469248 -0.0043978317 0.0020824395 0.0036526033 -0.0157819387 -0.0045576151 -0.0267143620 0.0004555230 0.0105165093 -0.0122786742 -0.0425673188 0.0099644803 0.0005549652 0.0146748730 -0.0032919631 0.0147369431 0.0100297840 -0.0046730747 0.0059269651 0.0161477803 0.0244243623 0.0050413723 0.0201511974 -0.0187581475 0.0097372249 -0.0014452447 0.0076996686 0.0043440520 -0.0038181390 0.0025102406 0.0036191483 0.0131481570 -0.0038041209 -0.0086936418 0.0103797345 -0.0020245997 -0.0080611163 0.0160580985 0.0243428685 0.0031725674 0.0124029988 -0.0207261408 0.0016531221 -0.0017366646 0.0017670243 -0.0065294715 -0.0112055336 -0.0043241326 0.0209086415 -0.0040219770 0.0066526934 -0.0019830605 -0.0380144225 0.0105043866 0.0014126437 0.0094409049 -0.0054636895 0.0226691887 0.0020085795 0.0365476132 -0.0219302417 -0.0296645538 -0.0325701916 0.0029223955 -0.0116917837 0.0225659798 -0.0051501109 0.0050033074 -0.0072698526 0.0323538854 0.0034599706 -0.0159894750 -0.0135613216 -0.0248324638 0.0153103343 -0.0058739142 -0.0116778105 0.0204360279 -0.0767066363 -0.0621411242 0.0254170550 0.1581774321 -0.0268160313 -0.0789683170 0.0002253500 0.0086421328 0.0019315899 0.0717581129 0.0348390327 -0.0116969719 0.0401284107 -0.0042365283 -0.0205483349 -0.0381304146 0.0130254506 -0.0186121883 -0.0573059219 0.0569525003 -0.0120286345 0.0008728868 0.0061833218 0.0013720481 0.0528225908 -0.0825551958 0.0207367467 -0.1639697598 0.0245225346 -0.0771958449 0.0613519647 0.0212708210 0.0204771180 -0.0497108532 0.0384908770 0.0201189903 -0.0011065551 -0.0018796109 0.0021511558 0.0024049604 -0.0030383822 0.0039465289 -0.0062774234 -0.0054485427 0.0005508667 0.0018655857 -0.0140256274 0.0100149115 -0.0011890046 0.0029846336 -0.0014613442 0.0004217047 0.0000640824 0.0005598823 -0.0005134019 0.0017798840 0.0010615653 0.0002875032 0.0000865793 -0.0004320054 -0.0017601138 0.0000103004 -0.0009307945 0.0012599863 -0.0013956478 0.0009821233 -0.0001147418 -0.0003574983 -0.0001939029 0.0005108453 -0.0013165691 -0.0006660900 0.0065512164 -0.0068619222 0.0022104033 -0.0128719486 0.0074231328 -0.0072972824 0.0009372440 0.0016021222 0.0006855313 -0.0017174034 0.0004991145 -0.0010584375 0.0058223025 -0.0169526205 0.0074437108 0.0028841223 -0.0035514844 0.0021005486 -0.0162769887 0.0239815386 0.0060896108 -0.0037308475 -0.0044173869 -0.0036691796 -0.0144053785 0.0305687650 -0.0133441066 0.0277311352 -0.0328550235 0.0079860366 0.0037931397 -0.0103395650 0.0026369563 0.0047012473 -0.0123777923 -0.0082614487 0.1265906568 -0.1802643523 0.0245016408 -0.1297414034 0.2009071263 -0.0573240721 -0.0468396787 0.0492218169 -0.0192270783 0.0803755330 -0.1247165508 0.0425618308 -0.0000257249 0.0007588302 -0.0000699118 0.0081417299 -0.0121941045 0.0016885421 0.0682224767 -0.0378872245 0.0114321656 0.0019727104 -0.0018951784 0.0002204201 -0.0007318940 0.0020085793 0.0021144463 0.0011503929 0.0012095773 0.0005351044 -0.0007672280 -0.0006659639 -0.0005488784 0.0003440248 0.0002791335 -0.0000189671 0.0003681661 0.0001386443 0.0005760597 0.0005569846 0.0001653583 0.0003249772 0.0002803866 -0.0011295025 -0.0013902005 -0.0014335849 -0.0000568430 0.0008272938 -0.0005528526 -0.0007925094 -0.0004207763 -0.0012355865 0.0003017782 0.0000382611 -0.0000184093 -0.0009985869 0.0013790503 -0.0010800854 0.0004619919 -0.0030757110 0.0067095887 0.0012913566 0.0009911048 -0.0031039624 0.0010197745 0.0015866357 -0.0017843034 0.0006532170 0.0004458434 0.0012866096 -0.0009745704 -0.0016092127 -0.0011934364 -0.0001601061 0.0000870111 0.0028169241 0.0008067369 -0.0010408618 0.0033025818 0.0007086492 -0.0018440294 -0.0030602810 0.0022044150 0.0046289046 -0.0740837678 -0.0157878370 0.0159673206 -0.0007360026 0.0388724600 0.0869018980 0.0208807072 -0.0033959621 -0.0373385774 0.0170931104 0.0018585755 -0.0030757778 0.0221688712 0.0288090437 0.0182798948 -0.0181500766 -0.0581151112 -0.0713838984 0.1474888983 0.1840900361 0.1118989914 0.1932063108 -0.0473119509 -0.1497744146 -0.0074904993 0.0000561715 0.0017510998 0.2266913561 0.1000070505 0.0876832997 0.0915797903 -0.0199874874 -0.2163762585 0.0121947100 0.0237867557 0.0746354693 -0.0251673290 0.0105475224 -0.0215126644 -0.0088628938 0.0038600196 -0.0025773069 -0.0175193556 0.0229153651 0.0109686512 0.0028684218 -0.0397819342 -0.0637722627 -0.0744690542 0.1541621661 0.1137863266 -0.1902821291 0.0476888285 -0.1449201404 0.0039092613 -0.0014407321 0.0006201086 -0.1582337221 0.1298094955 0.0735643069 -0.1076065273 0.0115709107 -0.1787576849 -0.0009273997 0.0003383864 0.0070818103 -0.0042440040 -0.0021487367 -0.0058537489 0.0019176380 -0.0004252180 0.0035453619 0.0019899738 -0.0019512862 -0.0022433265 0.0291348039 0.0084322876 -0.0145031816 0.0529835605 -0.0133775064 -0.0418776694 0.0154114432 0.0151240582 -0.0100920313 -0.0171670628 0.0747911550 0.0215226303 0.1269156734 -0.0083988491 -0.0513586427 0.0603375434 0.2037134038 -0.0480564310 -0.0028498300 -0.0714370477 0.0158818052 -0.0664793613 -0.0452710931 0.0203722050 -0.0283338133 -0.0784076393 -0.1170073553 -0.0216363828 -0.0886896222 0.0879516251 -0.0553494644 0.0034188071 -0.0411571093 -0.0240615227 0.0178703569 -0.0140346775 -0.0190971412 -0.0646015887 0.0178986130 0.0481017969 -0.0599598517 0.0138988426 0.0338134270 -0.0789460086 -0.1255406878 -0.0168967484 -0.0817895133 0.1024384915 -0.0077194675 0.0183638220 -0.0088504890 0.0352790901 0.0589913804 0.0222443129 -0.1097782277 0.0309973527 -0.0373491760 0.0112183521 0.1954078199 -0.0499496353 0.0004626353 0.0033072210 -0.0020845143 0.0079636911 0.0007657399 0.0129857076 -0.0080375928 -0.0110432070 -0.0120668801 0.0009639148 -0.0042146902 0.0077586815 -0.0022766674 0.0018136198 -0.0025339878 0.0119528388 0.0006847922 -0.0063874781 -0.0046009372 -0.0093751417 0.0055154167 -0.0025966437 -0.0044852728 0.0077727977 0.0010314994 0.0005773648 -0.0002220524 -0.0024640618 0.0001347384 0.0015073980 -0.0001686996 -0.0003690444 -0.0001175875 -0.0005462614 0.0014127003 0.0007789424 0.0010833549 -0.0003901872 -0.0008070423 0.0018854061 0.0007986816 0.0012144231 -0.0008232418 -0.0011721966 -0.0005846886 -0.0001328686 -0.0000489553 -0.0000088162 0.0005306447 -0.0007674499 0.0001362838 -0.0020908855 0.0001292178 -0.0010136577 -0.0014550419 -0.0003856056 0.0007310703 -0.0003725765 0.0007197623 0.0002945581 0.0069023367 0.0040230744 0.0023865527 -0.0022412649 0.0028498509 0.0023292187 -0.0078652793 -0.0121570424 -0.0086722703 -0.0203911605 0.0782367972 -0.0680075626 0.0032745050 -0.0010550361 -0.0118638385 0.0015000842 -0.0039172313 -0.0082198806 0.0034834484 -0.0008194507 0.0089905477 0.0106449282 0.0053977435 -0.0102044529 -0.0110194798 -0.0118333691 0.0028029582 0.0012746019 0.0051601229 0.0004998724 -0.0020695708 0.0023069607 0.0029652766 0.0239476539 0.0282634087 0.0064909437 -0.0220037640 -0.0056972436 0.0235240195 0.0253322934 0.0278451083 0.0260601891 -0.0158990410 -0.0021883551 0.0068068103 0.0195971380 0.0010587089 0.0194612091 -0.0523632154 0.1954868030 -0.1086072164 0.0014080216 -0.0001249246 -0.0175704495 -0.0001699354 0.0364778908 0.1587392171 0.0131894877 -0.0029892363 -0.0613643714 -0.0070269542 -0.0311298819 -0.0509358509 0.1217779505 0.0958534486 -0.0081907072 -0.1283118956 -0.0806594379 0.0475962346 0.1464373261 -0.0110725847 -0.3351272893 -0.1813769307 -0.1175586601 -0.3142675479 0.3274726909 0.0645569238 -0.3658420881 -0.3038936466 -0.2450796787 -0.2275438112 -0.0157660006 0.0477352884 0.1744974240 -0.0004251027 -0.0026666027 0.0010530427 -0.0109824790 0.0305883910 -0.0057411768 0.0007229057 -0.0003890042 0.0000994071 -0.0103461011 0.0189697323 -0.0005538206 0.0104361979 -0.0109993367 -0.0151077391 -0.0082869733 -0.0131619565 -0.0051474225 0.0038961471 0.0065748649 -0.0002612953 -0.0024785170 -0.0024618066 0.0005260575 -0.0016317561 -0.0021777891 0.0014875211 -0.0018576514 -0.0016165972 0.0004717946 0.0015149860 0.0049355969 0.0044580503 0.0045408034 0.0034728947 0.0010906663 0.0048484014 0.0025034883 0.0060404513 0.0060186338 -0.0031717793 0.0089920784 -0.0002702942 0.0058099281 -0.0076512973 -0.0033101482 0.0037321164 -0.0077410004 0.0066120930 0.0007900944 0.0020631699 -0.0103438428 0.0006946842 -0.0087277779 0.0080788871 -0.0020082527 -0.0065915633 -0.0019355854 0.0049330019 0.0012600387 -0.0000476297 0.0040028631 0.0035284784 -0.0257392140 -0.0030303830 0.0127395132 -0.0253944657 -0.0041289836 0.0178640247 0.0174477476 -0.0145022980 -0.0305058667 0.0004979131 0.0000974466 0.0001641959 -0.0008444020 0.0001242991 -0.0016739083 0.0006380730 -0.0005883661 0.0017503418 0.0006930897 -0.0001205295 0.0002860180 -0.0011487059 0.0012909321 -0.0024804526 0.0012099572 -0.0005991037 0.0016281760 -0.0013970336 -0.0083531924 0.0007243692 -0.0063376500 0.0093177220 -0.0009861822 0.0000463614 0.0004801411 0.0006996668 0.0003495055 -0.0169920325 0.0045920298 -0.0065708399 0.0088151321 -0.0008052488 0.0000585582 0.0002169477 0.0000726915 -0.0004709752 -0.0000262274 0.0000391591 0.0005294568 -0.0001736798 0.0000459778 -0.0002718159 0.0001322074 -0.0000420131 0.0001633638 0.0000549816 -0.0001152401 -0.0017399115 0.0005869087 0.0009929394 -0.0005986089 0.0021328603 -0.0020097131 -0.0001481366 -0.0000463078 -0.0000466012 -0.0016163825 0.0021432157 0.0004412509 -0.0017194134 -0.0011081073 -0.0000903629 0.0000876304 0.0002769428 -0.0004813378 -0.0003028597 -0.0003798068 -0.0001054407 -0.0000085008 0.0000630687 0.0003166941 0.0000073830 -0.0000380766 -0.0002514013 -0.0002498795 0.0000685897 0.0002119743 -0.0010458469 0.0013782608 0.0006530876 -0.0002850130 -0.0013718304 -0.0000510502 0.0000869539 -0.0001771446 0.0000675546 -0.0003411186 -0.0014071403 0.0003929648 -0.0002541540 -0.0002331231 -0.0005237734 0.0000039544 -0.0001761792 0.0002160979 0.0010206086 0.0005955975 -0.0007364173 0.0000158501 -0.0001685316 -0.0014115762 0.0013540647 0.0016112714 0.0004097957 -0.0017846275 -0.0007818312 -0.0008988105 -0.0007834153 -0.0002476360 -0.0004427388 -0.0005142917 -0.0003362908 -0.0002297680 0.0015110869 -0.0025322044 0.0010571607 -0.0025421592 -0.0002707892 -0.0019798907 -0.0006209206 -0.0060885476 0.0001959168 -0.0000144443 0.0023066957 -0.0001266766 0.0011269528 0.0014694294 0.0004504520 -0.0030941430 0.0027520793 -0.0017990770 0.0003190091 0.0039494436 0.0001082586 -0.0111357740 -0.0204042077 0.0125024804 -0.0551231727 -0.0217435970 -0.1055199660 0.0520601128 0.0540389722 0.0541916493 0.0103285541 0.0385377859 -0.0313239780 0.0200216422 -0.0185050487 0.0236367899 -0.1574679017 -0.0418119348 0.0365480403 0.0323703597 0.0902845748 -0.0459673988 0.0375025656 0.0530857703 -0.0717079512 -0.0021356040 -0.0012556022 0.0006764638 0.0040504300 -0.0005414559 -0.0021431139 0.0001726801 0.0003798323 0.0001721859 0.0006424202 -0.0028286673 -0.0010888312 -0.0032478471 0.0018114202 0.0019701776 -0.0045503551 -0.0016751169 -0.0029063009 0.0011639065 0.0029244317 0.0008864962 0.0002686536 0.0002369513 0.0000260477 -0.0008590976 0.0009003797 -0.0001524865 0.0024598895 0.0001001434 0.0011429427 0.0016376615 0.0006677902 0.0004208233 0.0006432849 -0.0011997384 -0.0006722535 -0.0114911229 -0.0047555182 -0.0049593242 0.0062561584 -0.0107770330 -0.0074017602 0.0139116091 0.0215029271 0.0164347465 0.0433027802 -0.1824949286 0.1020551279 -0.0341662511 -0.0127452283 0.0549063222 -0.0081284959 0.0129548612 0.0325902787 -0.0098633826 -0.0042024342 -0.0044677076 -0.0208243626 -0.0144948862 0.0138621353 0.0305436185 0.0293058567 -0.0075746884 0.0049072806 -0.0061220458 -0.0187260054 0.0039950433 -0.0045050839 -0.0069053955 -0.0659201163 -0.1003742114 -0.0467058395 0.0454033069 0.0251293285 -0.0554344766 -0.0288562800 -0.0987641846 -0.0736287001 0.0112877228 0.0056450185 -0.0099574581 -0.0212482302 0.0212650271 0.0024469003 0.1441364312 -0.4699496800 0.3869938128 0.0043307437 0.0057720164 0.0075299635 0.0036933797 0.0089654051 0.0512714584 -0.0074318929 -0.0042517566 -0.0194108802 0.0068211157 -0.0236800268 -0.0151069355 0.0186968144 0.0307640673 -0.0091951878 -0.0293598490 -0.0211536595 0.0031360797 0.0283794046 -0.0159349094 -0.0785792646 -0.1140223534 0.0367499199 -0.1231793907 0.1262252976 -0.0426007069 -0.1057043333 -0.0776908600 -0.0675132626 -0.0731878103 -0.0198087935 0.0337261019 0.0503835232 0.0022271045 0.0060774709 -0.0018584707 0.0189226931 -0.0506934816 0.0107874359 -0.0010035427 0.0006402836 -0.0000845190 0.0185918837 -0.0437975097 0.0013674319 -0.0248419418 0.0232588093 0.0376608302 0.0174762907 0.0289610496 0.0111624468 -0.0080835999 -0.0148182292 -0.0018147267 0.0047467251 0.0056600582 0.0001210638 0.0038592616 0.0045801877 -0.0000074191 0.0037701227 0.0036193872 0.0006841351 -0.0019172763 -0.0093912931 -0.0095066438 -0.0090892376 -0.0082394299 -0.0031935637 -0.0097680698 -0.0083668373 -0.0086094452 -0.0108589808 0.0070891638 -0.0223721468 0.0014714021 -0.0143320032 0.0160043448 0.0003146600 -0.0063821462 0.0055043121 -0.0064900267 -0.0055039221 -0.0027366273 0.0206120602 -0.0009389522 0.0127016013 -0.0190399511 0.0057924988 0.0118442304 0.0058767625 -0.0099050622 -0.0061455328 -0.0034545874 -0.0074663288 -0.0055107026 0.0593092805 0.0057800478 -0.0334484929 0.0597425497 0.0077303339 -0.0417274862 -0.0372094920 0.0311464533 0.0632704293 -0.0014457770 0.0000373382 0.0000390605 0.0008926169 -0.0005747459 0.0006982570 0.0003164580 0.0017666898 -0.0003017715 -0.0012770630 -0.0006082687 0.0004127129 0.0004021381 0.0002456839 -0.0006901678 0.0000653399 -0.0001184402 -0.0000418777 -0.0004627117 0.0073244103 -0.0023156819 0.0079633294 -0.0094074284 0.0032441036 0.0000940357 0.0003468584 0.0000324391 0.0042340738 -0.0003273701 0.0013380544 0.0023702242 -0.0001442418 -0.0022319879 0.0001322902 -0.0001058291 0.0004228819 0.0007367000 -0.0000836256 -0.0002418777 -0.0014251530 0.0005329802 -0.0001166847 0.0006344679 0.0001506435 0.0000534738 -0.0004058361 -0.0006560747 -0.0002992487 0.0023343165 -0.0009140045 -0.0006525191 0.0008013291 -0.0033848698 0.0028488168 0.0003737995 -0.0000355140 0.0002301459 0.0010571869 -0.0050612336 0.0003959607 0.0033168690 0.0026358765 -0.0013887333 0.0002184986 0.0000163751 0.0003119072 0.0000330307 0.0001138310 -0.0006911251 0.0000312217 -0.0000733477 -0.0006659497 0.0000411845 0.0000679652 0.0004567124 0.0014055646 -0.0010503750 -0.0010025905 0.0030634947 -0.0026598614 -0.0020256191 0.0021029076 0.0048984406 -0.0006596023 -0.0015610027 0.0046787585 0.0011507632 0.0112524338 0.0030517684 -0.0057312413 0.0024896211 0.0102985660 -0.0001903484 0.0010940064 -0.0016733168 -0.0005528256 -0.0052788369 -0.0048192840 0.0024759758 0.0050632002 -0.0031138709 -0.0063042357 -0.0024073675 -0.0156798723 0.0012854394 0.0039283633 0.0016201715 0.0021984330 0.0020870808 0.0010348340 0.0011594976 0.0020808958 0.0009724257 0.0004539070 -0.0040692063 0.0076353568 -0.0024502573 0.0069284887 0.0009153482 0.0097193360 0.0045981088 0.0195356465 -0.0017748189 0.0004389605 -0.0064981573 0.0006321630 -0.0035762681 -0.0046284427 -0.0015719024 0.0117501204 -0.0080486052 0.0063821605 -0.0015578661 -0.0120568137 0.0001654694 0.0259379845 0.0461654962 -0.0290111273 0.1241187912 0.0523418905 0.2393665833 -0.1139964837 -0.1141041097 -0.1170482571 -0.0272077687 -0.0879388785 0.0652702880 -0.0417297479 0.0379442039 -0.0538759240 0.3703349488 0.1171084727 -0.0601442583 -0.0801521763 -0.1975893193 0.1025846704 -0.0780959216 -0.1133003088 0.1484981623 0.0102143974 0.0191401922 -0.0013466627 -0.1112070470 0.0220799655 0.0501168056 -0.0140450858 0.0012859555 0.0075241705 -0.0388890250 0.0185434382 0.0287461963 -0.0174492459 0.0010258241 0.0053047119 0.0039156130 -0.0041852000 0.0058885004 -0.0110058152 -0.0206225219 -0.0210995450 -0.0094721451 0.0027579253 -0.0046238909 -0.0068605297 0.0027038594 -0.0036344009 -0.0338007938 0.0061887140 -0.0139089858 0.0080307521 0.0034275059 -0.0023632091 0.0288071239 -0.0219952170 -0.0069788736 -0.0030600510 0.0003482859 -0.0000594950 -0.0028217270 0.0042322030 0.0008061341 -0.0015414316 -0.0021303991 -0.0025546640 -0.0037928049 0.0148404373 -0.0100907827 0.0033778595 0.0003888583 -0.0060070584 0.0007543391 -0.0017043322 -0.0039790934 0.0006377423 0.0006479245 0.0005515934 0.0029924270 0.0020343410 -0.0018775766 -0.0038423413 -0.0035333392 0.0013280410 -0.0002574981 0.0007869849 0.0020037895 -0.0006887754 0.0003376179 0.0010566346 0.0084039803 0.0141430471 0.0058808884 -0.0069973271 -0.0020966022 0.0092948957 0.0028046978 0.0105742529 0.0074250477 -0.0004710750 -0.0007720455 0.0007516996 0.0012323487 -0.0009618546 -0.0004703182 -0.0063961723 0.0225990445 -0.0195805699 0.0000911996 -0.0004168928 -0.0004110574 -0.0002228937 0.0000894106 -0.0006235492 -0.0006468102 -0.0008482910 0.0002052184 0.0004979610 0.0023692858 -0.0006808634 -0.0003502456 -0.0017277540 0.0005911190 0.0010903115 0.0009478048 0.0000635955 -0.0026177544 0.0004111793 0.0020857564 0.0084874398 -0.0076009741 0.0031955797 -0.0081396800 0.0043183007 0.0068740186 0.0033404826 0.0026566903 0.0035229760 0.0021224762 -0.0009882508 -0.0005155982 0.0002432830 -0.0002399403 0.0005680821 -0.0040922460 0.0059172666 -0.0018239896 -0.0056332658 0.0053903646 -0.0029252559 -0.0010699925 0.0025951017 -0.0002637826 0.0012987195 -0.0011496522 -0.0018168115 -0.0008714604 -0.0013829014 -0.0005504120 0.0004328134 0.0006485629 0.0001547994 -0.0002817212 -0.0002319283 0.0000607465 0.0001243472 -0.0003595587 -0.0000783450 -0.0002930536 -0.0001390840 -0.0001044250 0.0002796987 0.0003407720 0.0001884627 0.0002668571 0.0005311625 0.0004381413 0.0004842011 0.0005427462 0.0004692498 0.0007235369 -0.0002835394 0.0005538884 0.0000081110 0.0007091600 -0.0009984994 0.0004429167 0.0006500199 -0.0000711626 -0.0014508334 0.0005039559 0.0001181870 -0.0014314246 0.0001267013 -0.0006752151 0.0009632996 -0.0003390426 -0.0003858375 -0.0006045948 0.0006430920 0.0007441399 0.0005245838 0.0001950251 0.0000966458 -0.0030715123 -0.0001920146 0.0017790705 -0.0030756939 -0.0003747457 0.0022824902 0.0017513930 -0.0015190515 -0.0030619719 0.0161606800 0.0028657773 -0.0019460674 -0.0002332995 -0.0030715960 -0.0092690911 -0.0058977283 -0.0039795945 -0.0003820469 -0.0007543105 0.0001409337 0.0004823197 -0.0040454013 -0.0005657253 0.0030826035 0.0017096947 0.0048770386 0.0053430282 -0.0149981396 -0.0272745284 -0.0091063174 -0.0271473436 0.0032613480 0.0111450320 0.0005615007 -0.0000953541 -0.0000845823 -0.0214095985 -0.0075650946 -0.0020703306 -0.0118670313 0.0008992956 0.0227253332 -0.0009294540 -0.0013988961 -0.0022931335 0.0023800824 -0.0019969246 -0.0009137204 -0.0000490185 -0.0000699588 -0.0001589376 0.0029642784 -0.0008099600 0.0023834124 -0.0007086952 0.0015539934 0.0037184118 0.0081767947 -0.0057669654 -0.0070377115 0.0082752434 -0.0049709829 0.0047578176 -0.0000739615 0.0000521814 -0.0000419285 0.0116844220 -0.0099031076 -0.0009968560 0.0089622464 0.0019700988 0.0091605871 0.0002653905 0.0000692182 -0.0002391511 0.0002290842 0.0000461507 -0.0000585251 -0.0001008856 0.0000614693 -0.0000251429 -0.0001538238 0.0001256040 0.0000576453 0.0125276539 -0.0233296787 -0.0102298991 -0.0032691804 0.0468396563 0.0025742507 0.0535828560 0.0357456017 -0.0285074327 -0.0466562589 0.1449094026 0.0403101644 0.3843194506 -0.0377925061 -0.2012601105 0.0871334354 0.3415277398 -0.0357676119 0.0390179208 -0.0738460994 -0.0118627830 -0.0817928367 -0.1104757198 0.0247165199 0.2388003180 -0.1347783337 -0.3147493659 0.0179158551 -0.3931853335 0.0346175018 -0.0035490770 -0.0298416453 0.0107542619 0.0156284086 0.0045202942 0.0075724327 0.0384604013 0.0467477979 -0.0016647572 -0.0302961666 0.0820933547 -0.0098685692 0.1030518879 0.0466796074 0.2144585135 0.0916851051 0.2147838542 -0.0438366351 0.0234794074 -0.0259098494 0.0163354943 -0.0556064910 -0.0782379964 -0.0271889275 0.2267825133 -0.0493039624 0.1146271512 -0.0125015305 -0.2378121786 0.0271070764 -0.0012140476 -0.0026264769 0.0016216221 -0.0068507193 -0.0024159377 -0.0128109714 0.0064128941 0.0068159507 0.0071476826 0.0010174627 0.0045910200 -0.0042800833 0.0022293868 -0.0020436966 0.0028666114 -0.0184795699 -0.0061404143 0.0030836673 0.0032867716 0.0108632478 -0.0051289085 0.0034711013 0.0056377971 -0.0083955911 0.0266571274 0.0286502223 -0.0079747090 -0.1125938236 0.0254828300 0.0564657192 -0.0052565372 0.0017047196 0.0029278417 -0.0539142891 -0.0123378011 0.0076581912 -0.0362613191 -0.0034591581 0.0197508320 0.0362136196 -0.0165826947 0.0186942717 0.0636673076 -0.0218187405 0.0219805142 0.0124738643 -0.0010373526 0.0063800132 -0.0160877539 0.0408751052 -0.0059494695 0.1596985959 -0.0183487669 0.0756983110 -0.0514515195 -0.0166757546 -0.0181733609 0.0326357476 -0.0236536492 -0.0159442721 0.0012876581 0.0008283184 0.0007251101 -0.0009057114 0.0018593719 -0.0037188802 0.0036671272 0.0034751630 -0.0023013504 0.0030609470 -0.0065793880 0.0021261513 -0.0027030575 -0.0017677073 0.0036711177 -0.0005204334 0.0006567830 0.0017801170 -0.0002766000 -0.0005768351 0.0001584565 -0.0009395406 -0.0009277976 0.0002134737 0.0018771630 0.0014909483 -0.0002572072 0.0000371538 -0.0000504655 -0.0014400958 0.0002078516 0.0002657432 -0.0001124798 -0.0035667383 -0.0065605708 -0.0035662063 0.0015314158 0.0022503720 -0.0036980580 0.0020198382 -0.0076989130 -0.0022078781 -0.0000706889 0.0001430473 -0.0003651423 -0.0008884874 0.0006374925 -0.0001504118 0.0027979786 -0.0109228021 0.0092165913 -0.0000032833 0.0001449376 0.0006348357 -0.0000154399 -0.0003461703 -0.0001945323 -0.0001330738 0.0002199548 0.0002605260 0.0005956087 -0.0007690634 0.0000461459 -0.0008539846 0.0003207188 -0.0000835568 0.0006423503 0.0003366267 -0.0005517071 -0.0004653059 -0.0002690137 0.0018902721 -0.0045531274 0.0036030147 -0.0034010799 0.0012082245 -0.0038800096 0.0027393536 0.0010680886 0.0001563138 -0.0002709944 -0.0020380311 0.0004042143 -0.0004002215 -0.0001275797 -0.0001892284 0.0000635629 0.0008783579 0.0033373948 -0.0007877782 -0.0346205910 0.0209657549 -0.0060944575 0.0002358429 -0.0013682205 0.0001656434 -0.0012267745 0.0002277271 0.0010211071 0.0003988855 0.0006133440 0.0002466408 -0.0000717545 -0.0001590277 0.0000485222 0.0000199461 0.0000286711 -0.0000532056 0.0002593869 -0.0000798777 -0.0000575401 -0.0000287982 -0.0000065435 -0.0000741436 -0.0007276694 0.0003398027 0.0009007011 0.0007234258 -0.0006505240 -0.0012717622 -0.0000997661 -0.0001680041 -0.0000710375 -0.0001152700 0.0000539255 -0.0002503496 0.0000060396 0.0000240825 -0.0000268840 0.0000809389 -0.0003634730 0.0002219483 -0.0009822626 -0.0001510246 -0.0000948774 -0.0013217808 0.0004801426 0.0000131881 0.0000435894 -0.0000434609 0.0000026902 -0.0001377746 0.0000521989 0.0001939325 0.0000688396 -0.0000002081 -0.0000527629 0.0018534652 -0.0003299598 -0.0014520703 0.0017970127 -0.0001466161 -0.0018217111 -0.0000516166 0.0004062726 0.0005501888 0.0356551417 0.0100276374 -0.0091833115 0.0005236881 -0.0072063422 -0.0164822369 -0.0136774256 -0.0082171288 -0.0020144008 -0.0013514138 -0.0001051033 0.0004699571 -0.0110606464 -0.0003198307 0.0093064373 0.0045705752 0.0099505610 0.0132738304 -0.0392698727 -0.0457026469 -0.0239596482 -0.0514927027 -0.0009616570 0.0233245896 0.0010945080 0.0000167548 -0.0002926093 -0.0543530428 -0.0219885622 -0.0019697928 -0.0295386352 0.0089207199 0.0479355937 -0.0036332597 -0.0049503668 -0.0178040599 0.0129245047 -0.0122318376 -0.0045973613 0.0000682608 0.0002529429 0.0006829652 0.0108959254 -0.0036673825 0.0088300800 -0.0015361157 0.0081261596 0.0136170408 0.0209277553 -0.0461859103 -0.0293527732 0.0628582333 -0.0255258474 0.0333516797 -0.0005685561 0.0001380677 -0.0000580426 0.0445262798 -0.0334664194 -0.0047117558 0.0398038369 -0.0040355621 0.0500249822 0.0005227055 0.0000999607 -0.0007116457 0.0007695433 0.0002693873 0.0003023998 -0.0006474668 0.0004005277 -0.0001092873 -0.0004801675 0.0002035365 -0.0004481461 -0.0020610492 -0.0197598998 -0.0028056354 -0.0145987521 0.0216567341 0.0193186583 0.0323480233 0.0301889285 -0.0159816645 -0.0246680551 0.0665649698 0.0200411168 0.2112338961 -0.0091786329 -0.1096802592 0.0252167477 0.1430030672 -0.0084083098 0.0301307986 -0.0182958455 -0.0131224504 -0.0401760406 -0.0576133839 0.0128763022 0.1803400668 -0.0581867863 -0.1645299210 0.0154730062 -0.2315796559 0.0046509001 0.0271610714 0.0362034371 0.0186714020 -0.0139992606 -0.0248364777 -0.0086344345 -0.0625331506 -0.0355759731 -0.0144209653 0.0394804621 -0.1269888284 0.0174834317 -0.2727484328 -0.0204449617 -0.3202598292 -0.1632819666 -0.3807158209 0.0264119301 -0.0387806862 0.0603190494 -0.0268507660 0.0845956691 0.1093077340 0.0402934373 -0.3724130975 0.0993077444 -0.1922608453 0.0322931566 0.3067294990 -0.0223248686 0.0009178621 0.0013970099 -0.0008811069 0.0037761438 0.0018408600 0.0075364248 -0.0038177910 -0.0033937592 -0.0032467848 -0.0011089573 -0.0028825072 0.0017092424 -0.0005813740 0.0007219376 -0.0016325781 0.0078354233 0.0033568583 -0.0007736725 -0.0026640684 -0.0047036842 0.0026160165 0.0000790707 -0.0014830431 0.0034773002 0.0005756773 0.0005540240 -0.0002172816 -0.0031771004 0.0004784323 0.0008876905 -0.0003891640 -0.0001544803 0.0001754672 -0.0006220067 0.0017163795 0.0009073447 0.0012997418 -0.0008041117 -0.0008342500 0.0014620879 0.0004154734 0.0009886717 -0.0010536549 -0.0016288371 -0.0009166089 -0.0004886628 0.0001082519 -0.0002239948 0.0000431644 -0.0002826446 -0.0000338722 -0.0026094668 0.0003393571 -0.0011030839 0.0001081455 0.0000524578 -0.0002945244 0.0001109167 0.0003414180 0.0003518749 0.0038954821 0.0014749265 0.0018914963 -0.0023831009 0.0042223001 0.0029054382 -0.0051325403 -0.0076914368 -0.0070812475 -0.0040559339 0.0656195542 -0.0157073794 -0.1288801383 -0.0193552593 0.1992503661 -0.0254637763 0.0546191379 0.1292302572 -0.0129567134 -0.0122664524 0.0038240057 -0.0869319010 -0.0716739123 0.0416518792 0.1207916896 0.0997762091 -0.0498583694 0.0038149927 -0.0281873942 -0.0709348783 0.0178882294 -0.0040399659 -0.0289908567 -0.2986086015 -0.5051538213 -0.2530333034 0.2128354241 0.0633654981 -0.3436659930 -0.0579336431 -0.3653506660 -0.2203020196 0.0018910736 0.0134590637 0.0189782211 -0.0006448418 0.0009908970 0.0005646650 -0.0172233607 0.1092638275 -0.1459925329 -0.0010789946 -0.0065435025 0.0007729556 -0.0024042413 -0.0016307223 -0.0033928291 0.0043706334 0.0040177361 0.0019441533 -0.0006930676 0.0068350997 -0.0011976439 0.0025879104 -0.0020608086 0.0019445960 0.0025038203 0.0017338114 -0.0001664161 0.0093702915 -0.0002086270 0.0015498110 0.0264157305 -0.0239289869 0.0121832531 -0.0150898150 0.0141338221 0.0122463166 0.0014573453 0.0016178922 -0.0021465342 -0.0061103667 -0.0098674826 -0.0015123982 0.0025127996 0.0070681185 0.0061660211 -0.0445985263 -0.0086885621 0.0291057501 0.0002226667 -0.0000574279 -0.0001098604 -0.0071729686 0.0226138745 -0.0058911066 0.0140315639 -0.0072760532 -0.0152003296 -0.0058073310 -0.0083828894 -0.0026164172 0.0025209009 0.0047543952 0.0004122016 -0.0015647747 -0.0018781247 0.0001053523 -0.0012811510 -0.0016384326 0.0001561527 -0.0012119598 -0.0012592857 -0.0001181216 0.0042455077 -0.0008449141 -0.0037698905 -0.0024280107 0.0061400647 0.0087197724 0.0033816350 0.0028889570 0.0029879532 0.0036772004 -0.0023454432 0.0070681016 -0.0005454509 0.0045246818 -0.0049366596 0.0001063732 0.0022913805 -0.0016973816 0.0031995363 0.0015087849 0.0010091544 -0.0069790639 0.0002453038 -0.0047907459 0.0061703381 -0.0018679484 -0.0041564441 -0.0016396250 0.0032451586 0.0014606562 0.0010492994 0.0025140308 0.0019774374 -0.0259693023 0.0008356581 0.0171154080 -0.0255552923 -0.0009341714 0.0213606103 0.0087803658 -0.0094554713 -0.0173159652 0.0005424777 0.0000457563 0.0002947446 -0.0000062542 0.0002732511 0.0009612024 -0.0009683712 -0.0002171698 -0.0008917992 0.0017989318 0.0004155751 -0.0003154742 -0.0000930231 0.0001645802 0.0005038527 -0.0005284766 -0.0008381178 -0.0011600849 0.0042395650 0.0043218877 0.0014884938 -0.0037165456 -0.0059397290 0.0071641035 -0.0002946153 -0.0000174629 -0.0003562581 -0.0001357707 -0.0003345186 0.0006064204 -0.0008702203 -0.0005088053 -0.0012704193 -0.0000256297 -0.0000227856 -0.0001551412 -0.0001899581 0.0000293749 0.0001398511 0.0004016505 -0.0001449019 -0.0000008174 -0.0000700780 -0.0000554369 0.0000063609 -0.0000230873 0.0002280756 0.0002944737 -0.0003375336 0.0001001294 0.0000000726 -0.0000968136 0.0010614748 -0.0007633174 -0.0001057331 0.0000134565 -0.0000776776 0.0007918099 0.0002687411 -0.0004769398 -0.0009028451 0.0002656826 -0.0002027179 -0.0002443975 -0.0001457824 -0.0000705683 -0.0000704895 0.0001595464 0.0007329732 -0.0000061539 0.0000127541 0.0001986343 -0.0000136521 -0.0000257759 -0.0001208817 -0.0001678868 0.0000941677 0.0001394731 -0.0010106523 0.0021792471 0.0006350435 0.0003750234 -0.0012533521 -0.0003648121 -0.0004617662 0.0016465521 0.0004504780 0.0041883202 -0.0021977254 -0.0024958015 0.0017129715 0.0046336606 -0.0008103059 0.0002867542 -0.0013816200 -0.0000721165 0.0000605874 -0.0006639141 -0.0002801216 0.0033900115 -0.0022508368 -0.0043237290 0.0009248968 -0.0022838698 0.0003472198 -0.0015251012 -0.0019509371 -0.0005255600 -0.0001036907 -0.0001577625 -0.0000714834 0.0010394341 0.0017071012 -0.0000535809 -0.0000345034 0.0011645119 0.0002475697 0.0036916231 0.0015637830 0.0061574136 0.0022118336 0.0031163490 -0.0010310481 0.0009306498 0.0009621026 0.0005196478 -0.0013246906 -0.0019818591 -0.0006713027 0.0063060082 0.0004306568 0.0031196133 0.0001264517 -0.0069324050 0.0010856591 -0.0077472831 -0.0240257035 0.0126731866 -0.0580155640 -0.0107615519 -0.0958360702 0.0548418061 0.0652720017 0.0697026450 0.0035831972 0.0354346483 -0.0449897175 0.0127796410 -0.0133999504 0.0232124954 -0.1370721085 -0.0478540036 0.0200203729 0.0366552334 0.0740554654 -0.0404936842 0.0134608587 0.0321198637 -0.0554317769 0.0002292650 0.0002028668 -0.0000366735 -0.0008992922 0.0005220483 0.0007130175 0.0000697169 0.0003132683 -0.0000079458 -0.0004807456 -0.0011467034 -0.0001951487 -0.0013351810 0.0002767100 0.0006803417 -0.0008498771 -0.0005074729 -0.0006563249 0.0010776709 0.0006370767 0.0005059504 0.0002512404 -0.0001134139 0.0000403457 -0.0004715333 0.0007506257 -0.0001205352 0.0030763935 -0.0004409822 0.0016834029 0.0005593933 0.0001214957 -0.0003805487 0.0011660692 -0.0013954755 -0.0001008662 -0.0053088262 -0.0026216066 -0.0028686266 0.0020731546 -0.0027110508 -0.0012172219 0.0068142683 0.0088855677 0.0072083816 0.0010322857 0.0015499025 0.0052703507 0.0110120212 0.0045364284 -0.0113206655 0.0011353059 -0.0023001644 -0.0058467279 0.0000046133 0.0015300268 -0.0025512752 0.0029493440 0.0027130266 0.0016318594 -0.0048089962 -0.0045976307 0.0005562955 -0.0015731978 0.0010548779 0.0059262939 -0.0009167028 0.0008969862 -0.0018494338 0.0087215140 0.0263698908 0.0131307544 -0.0050485002 -0.0058098326 0.0060567888 0.0013634454 0.0192060546 0.0137186388 0.0043600674 0.0033825048 -0.0010736548 -0.0053559495 -0.0098808416 0.0049158393 -0.0143991435 -0.0060021627 0.0238746722 -0.0020496366 0.0017713710 0.0018168351 0.0008307346 0.0008652459 0.0040595401 -0.0017580996 -0.0025442859 -0.0041856691 0.0037526914 -0.0004514170 0.0000918064 -0.0012453610 0.0005489652 -0.0029167257 0.0000965897 -0.0004242597 0.0006481215 0.0088811416 -0.0047995821 -0.0209071728 -0.0032900701 0.0224910463 0.0065125255 0.0071793068 -0.0072199604 -0.0073686787 -0.0019218377 0.0060875979 0.0030959132 0.0040467101 0.0072193297 0.0027692913 -0.0004746548 0.0009878136 -0.0001322965 0.0375666037 -0.0370588321 -0.0009875079 -0.0006394081 0.0002804326 -0.0000123439 0.0592198894 -0.0085173997 0.0233457172 0.1133391584 0.0236790402 -0.0765511594 -0.0119562107 -0.0233836066 -0.0037261383 -0.0009433516 0.0055816394 0.0026866951 0.0009662478 -0.0002732228 -0.0017881845 -0.0003315412 -0.0018385767 -0.0018658995 0.0009990911 0.0005762651 -0.0010728377 0.1117170562 -0.0784185636 -0.1635691949 -0.1372135644 0.0771188359 0.1859307190 -0.0016837138 0.0033728944 -0.0068411904 -0.0057809379 -0.0003206123 0.0128619824 -0.0000209564 0.0011250484 -0.0003522834 0.0064480836 0.0025475385 0.0051831118 0.0002401542 0.0027294748 -0.0002302729 -0.0025329397 -0.0008599709 -0.0000294533 -0.0043168847 0.0007877103 0.0027350912 0.0030537677 -0.0001549670 -0.0052137093 0.0090513157 -0.0025323363 -0.0027373857 -0.1246091395 0.0668020035 0.1325001160 -0.1114517724 0.0463167172 0.1644749387 -0.0957928414 0.0228044539 0.0925533551 0.0004250270 0.0001153375 -0.0003580439 0.0001613306 -0.0002898834 0.0000576967 -0.0001715829 0.0003897510 -0.0001913499 -0.0001798010 -0.0001919138 -0.0000358132 -0.0001694717 0.0000955431 0.0002715654 0.0001224668 0.0002399839 0.0002723052 -0.0026544461 0.0003530383 -0.0013804098 0.0024735295 -0.0031007758 0.0006256157 -0.0000357572 -0.0000067710 -0.0001381506 -0.0010806741 -0.0009084144 0.0002425758 0.0006348365 0.0000613531 0.0000590914 0.0001358278 0.0000397070 0.0000681398 0.0002493916 -0.0003069283 -0.0002176793 -0.0005061768 0.0003583256 -0.0000808043 0.0003939538 0.0002343480 0.0002446046 -0.0000743715 -0.0001371059 -0.0000914622 0.0007122682 -0.0010904054 -0.0001504928 0.0006516705 -0.0007952272 0.0004169870 0.0002213767 -0.0001522668 -0.0001386166 0.0003347011 -0.0026917572 0.0005985634 0.0009139996 0.0010089371 -0.0005918063 0.0000349328 0.0000353071 0.0001721297 0.0000414028 0.0000602280 -0.0001520943 0.0000235401 0.0000247687 0.0002079815 0.0000176819 -0.0000167468 -0.0000982230 0.0000291223 -0.0004205664 -0.0000689752 0.0001588518 -0.0007654869 -0.0000385926 0.0002637246 0.0010487924 -0.0000490872 -0.0000873871 0.0000325233 0.0000186660 0.0007421542 0.0009819310 -0.0002514470 -0.0006425404 -0.0006692918 0.0003951643 0.0002566595 0.0005780013 -0.0001843902 -0.0004977034 -0.0004190224 0.0002923228 0.0008115713 0.0004800550 0.0002302860 -0.0001617529 -0.0023236322 -0.0003835247 0.0012522948 0.0011491110 0.0006319092 0.0001820584 -0.0000480191 0.0001371090 -0.0005431878 -0.0006525218 -0.0000403931 -0.0001843090 -0.0004386037 -0.0002434093 -0.0027120087 -0.0004614660 -0.0035264764 -0.0014149203 -0.0015728885 0.0003272572 -0.0005196446 -0.0005682297 -0.0003144646 0.0006228420 0.0008996105 0.0003236261 -0.0034784822 -0.0002734487 -0.0015131017 0.0000536281 0.0029495032 -0.0004497145 -0.0992445158 -0.0000900454 0.0160150200 -0.0472016450 -0.2232077267 -0.2837906353 0.1214925704 -0.0640562845 -0.1592234653 0.1992528035 0.1504322389 0.2290714968 -0.0740469942 0.0712918503 0.0687091885 0.1903285545 -0.1190643643 -0.1673492757 0.3371602933 -0.0511661449 -0.0912447575 -0.4066517316 -0.2716820156 0.0794245217 0.0488140294 0.0340785499 -0.0150849236 -0.1959049971 0.1090873624 0.1101984420 0.0190487916 0.0580105558 -0.0019180555 -0.0589350904 -0.1294072274 0.0213125876 -0.0904267739 -0.0566095130 0.0263657339 -0.0673327635 0.0846358079 -0.0241530788 -0.0134645251 0.1421450664 -0.0213191148 0.0001598804 -0.0615481530 -0.0000728070 0.0362648995 -0.0490909260 0.0144232295 -0.2241774174 -0.0389642119 -0.1132680897 0.0544856222 0.0128785937 0.0076324712 0.0465674835 -0.0281223799 -0.0060048938 -0.0469684600 -0.0084047748 -0.0115655501 0.0190747526 -0.0315067730 -0.0225144436 0.0410066326 0.0504167160 0.0460341065 -0.0172205171 0.0346531307 -0.0208396976 -0.0072486944 -0.0042747626 0.0065318402 -0.0012627780 0.0006167769 0.0028598576 -0.0017118160 0.0007617864 0.0014275574 0.0020301670 0.0007055090 -0.0018334149 -0.0007964750 -0.0005389334 0.0006185496 0.0027846679 -0.0003444257 -0.0039801883 -0.0049495792 -0.0055630167 0.0011997389 0.0028407748 0.0074748320 0.0010297078 -0.0033045629 0.0013979379 0.0075616216 -0.0017684395 -0.0048429077 -0.0090287547 0.0013670257 -0.0036358553 0.0028052028 -0.0009889766 0.0022845949 -0.0021581423 0.0085934678 -0.0128769087 -0.0012404208 0.0041885453 -0.0008174439 -0.0047978225 0.0047644124 0.0038906445 0.0006716389 -0.0040938363 -0.0046892980 -0.0066700833 -0.0018105161 0.0032243905 0.0038386807 -0.0009402015 -0.0033331568 -0.0009856217 -0.0044281052 -0.0014684231 0.0055651568 0.0035191272 -0.0035477554 -0.0266362425 0.0214610724 -0.0046039858 0.0293800080 -0.0086772919 0.0069230540 -0.0031784705 0.0015003552 0.0059073528 0.0178626761 0.0406794925 0.0241903551 -0.0049528744 0.0038388615 0.0034625412 -0.0004405673 -0.0225839880 0.0024822384 -0.0069793163 0.0753026315 -0.0596826169 0.0302496542 -0.0086782167 0.0160668021 -0.0088613032 0.0009560848 -0.0017755850 0.0004438864 -0.0013149262 -0.0010724979 -0.0010324160 0.0006555183 -0.0003927354 -0.0000120079 -0.0005060397 0.0002660038 0.0005424209 -0.0003492654 0.0002478713 0.0000034257 -0.0003112097 0.0003311560 -0.0002204044 0.0019223156 0.0000942732 -0.0014520827 -0.0000108436 0.0016204846 0.0019476100 0.0008253261 0.0011252694 0.0012917177 0.0018836405 0.0003859713 -0.0045455912 0.0002893559 -0.0004869449 -0.0008054702 -0.0003508632 0.0031140983 -0.0016576667 -0.0042048541 0.0003527125 -0.0001449062 0.0046720012 -0.0015385727 -0.0014324644 -0.0009529914 0.0000829290 0.0015844603 -0.0011877967 0.0004475046 0.0018988295 0.0003747536 0.0000712882 -0.0002626092 -0.0051616426 0.0000504159 0.0020293127 -0.0046879305 -0.0012325791 0.0041648739 0.0037059472 -0.0031262882 -0.0061018212 0.0866602507 0.0332831787 -0.0379402234 0.0048988671 -0.0102959415 -0.0157447785 -0.0290572783 -0.0192575785 -0.0115115488 -0.0043499553 -0.0023445625 -0.0016523202 -0.0312308802 0.0038503328 0.0339381008 0.0158325116 0.0161611558 0.0226840407 -0.1088961311 -0.0677627012 -0.0514269733 -0.0686566611 -0.0120918636 0.0129377786 0.0026984370 0.0013221763 -0.0005305165 -0.1511590675 -0.0562341755 0.0035470257 -0.0459478832 0.0289405543 0.0732604966 0.0091728154 0.0062091378 0.0167084548 -0.0249528904 0.0252856218 0.0149304935 -0.0008079727 0.0013344086 0.0016287546 -0.0304554122 0.0071629802 -0.0314034341 0.0103431359 -0.0143529731 -0.0231870362 -0.0742853987 0.0761369176 0.0578453004 -0.0853818573 0.0435868866 -0.0310740207 0.0014819641 -0.0011028212 0.0003957650 -0.1282188320 0.0884260650 0.0081461065 -0.0670281756 -0.0077542196 -0.0776839117 0.0010237646 0.0000310297 -0.0007946310 0.0020221250 0.0003527162 0.0008867364 0.0010464539 -0.0006762555 -0.0006620290 0.0014339922 -0.0005261375 0.0004948294 -0.0014296186 -0.0750301649 -0.0096503191 0.0098981705 -0.1253346632 -0.0149000424 0.0323062302 0.1430203886 -0.0016390721 -0.0059823930 -0.0365836839 -0.0029489726 0.0792166177 0.1405553883 -0.0338734011 -0.1892358125 -0.2643439272 0.0908413275 0.0247346546 0.1036672487 -0.0070701934 -0.0381317727 -0.0392572611 0.0201328739 -0.0433997979 0.1247364330 0.0674931797 0.0202839999 -0.2830240406 -0.0445603112 0.0471980640 0.1150258762 0.0164255657 0.0219302242 0.0713839417 0.0108564841 -0.0103210791 -0.1060444452 0.0062100936 -0.0228587489 0.0469285516 -0.0190127810 -0.0642794246 -0.1042926281 -0.0733716168 0.1021723338 0.2496646840 0.0523455525 -0.0148692978 -0.1436102247 -0.0020270343 0.0063513040 0.0373990214 0.0039494218 0.0284180962 -0.1564879716 0.0270754767 -0.0964395650 0.3162621960 -0.0831788370 0.0026033604 -0.0125401407 0.0068913614 -0.0264122146 0.0094095475 -0.0299174492 0.0255215746 0.0391980426 0.0466274867 -0.0088317119 0.0111966590 -0.0370769393 0.0085635784 -0.0095098137 0.0080958061 -0.0651008476 -0.0169562895 0.0157422155 -0.0030893711 0.0394837866 -0.0135503200 0.0180479793 0.0234667925 -0.0332665533 0.0032411149 0.0021189009 -0.0012438230 -0.0121613145 0.0055451800 0.0069409906 0.0012201539 0.0024072148 -0.0003887053 -0.0033624648 -0.0059106316 0.0014500301 -0.0035187566 -0.0031003956 0.0009245622 -0.0018629043 0.0054606003 -0.0001141766 -0.0013699500 0.0067437358 -0.0014048811 -0.0000596313 -0.0033284197 0.0000279056 0.0022802277 -0.0030799606 0.0009150830 -0.0147220541 -0.0018527465 -0.0073764977 -0.0002645125 -0.0002337488 0.0016475881 0.0005149079 0.0006095377 -0.0007149459 0.0097911451 0.0064893061 0.0051540419 -0.0033293115 0.0038058932 0.0039047099 -0.0151424753 -0.0189166189 -0.0154451826 0.0283324561 0.0181453767 -0.0583182674 0.0382570307 0.0292299825 -0.0278454217 0.0039178380 -0.0009232453 -0.0075009888 0.0078547527 -0.0080983923 -0.0179228360 -0.0105923215 -0.0020038489 0.0149620311 0.0035039759 0.0031647665 -0.0023774566 -0.0062044617 0.0012172119 0.0133141384 0.0047255056 0.0012162944 -0.0090019245 -0.0099206860 -0.0022564662 0.0166052272 0.0153289413 -0.0053251780 -0.0256690252 0.0070334166 0.0456366509 0.0363602692 0.0149451418 -0.0015101954 -0.0046979960 -0.0057236022 0.0051636360 0.0109995401 -0.0161321666 0.0711138380 -0.0790416480 -0.0443607045 -0.0144090304 0.0387722427 -0.0657830492 -0.0419058321 0.0194122961 0.0372219667 0.0446479718 0.0873369262 0.0398231691 -0.0018666050 -0.0977093487 0.0352894215 0.0351836639 0.0302097395 0.0540940686 0.0213115750 -0.0686301343 -0.1050202588 0.0436101547 0.4096661804 -0.1499585899 -0.1777961177 -0.4402255002 -0.0363153987 0.0184590370 0.2374024277 -0.0442701755 -0.1028076850 -0.2680848838 -0.4927370552 -0.3097372188 0.0937942747 -0.0027555894 -0.0032044612 0.0022569846 -0.0098770411 0.0043889485 0.0040662264 0.0045367291 -0.0034593431 0.0015177166 0.0067458564 -0.0083336153 0.0061210868 -0.0007323692 0.0022390608 0.0017091310 0.0008565402 -0.0001136658 -0.0002490208 -0.0008766444 -0.0006333672 -0.0005393508 0.0005288079 0.0003706818 0.0001796897 0.0002508256 0.0007059364 0.0002973194 0.0005565416 0.0002702919 0.0003584043 -0.0000362418 -0.0003632059 -0.0005973172 -0.0015748298 -0.0010682626 0.0000749286 -0.0009481465 -0.0008567962 -0.0007075314 -0.0008359859 0.0004592853 -0.0012773960 0.0002045171 -0.0015193601 0.0018368639 0.0002823134 -0.0030409601 0.0038152511 0.0062068910 -0.0048076745 -0.0014221242 -0.0023064238 0.0014880419 -0.0000663915 -0.0021537904 0.0007404358 0.0008289100 0.0015950823 -0.0009731722 -0.0023475623 -0.0005407841 -0.0002903437 -0.0000250987 0.0057869645 0.0009276962 -0.0000534469 0.0037310863 0.0047952626 -0.0021161550 -0.0052882200 0.0039477666 0.0066489719 0.0045060474 0.0017428375 -0.0011266133 0.0003693391 -0.0008941266 -0.0023447718 -0.0018927612 -0.0013369202 -0.0008936718 -0.0010849338 -0.0001404948 0.0002210651 -0.0010233642 0.0005504036 0.0012461027 -0.0000066561 0.0011672076 0.0019450979 -0.0047130046 -0.0059457922 -0.0032953940 -0.0048403300 -0.0016691702 0.0016671613 0.0003420808 -0.0004489866 -0.0011952490 0.0049993320 0.0024579781 0.0033754888 -0.0103405085 0.0005733525 0.0119594219 0.0005256608 0.0002458677 0.0009398347 -0.0016501619 0.0016780554 0.0011135877 0.0003390704 -0.0001865624 0.0001164484 -0.0016503222 0.0002980801 -0.0018700173 0.0003731578 -0.0005762068 -0.0010518494 -0.0037741999 0.0047722398 0.0030119680 -0.0057775952 0.0035570224 -0.0026523724 -0.0000326915 0.0000569680 0.0000491109 -0.0057075965 0.0036238617 -0.0002690257 -0.0058427627 0.0003953259 -0.0056701356 0.0000930196 -0.0001618223 0.0010127932 0.0002976512 0.0001429700 -0.0001310247 0.0000382666 -0.0000440258 -0.0001272384 0.0000630075 -0.0000391783 0.0001030568 0.0002041320 -0.0041327586 -0.0006139892 0.0001703576 -0.0061810168 -0.0006045725 0.0015586241 0.0072262704 -0.0000972507 -0.0003734284 -0.0020265262 -0.0001116884 0.0035598724 0.0072448618 -0.0011360007 -0.0109761312 -0.0151776614 0.0051687595 0.0010748761 0.0055389791 -0.0002056282 -0.0015085026 -0.0018880948 0.0007640589 -0.0026007888 0.0067048763 0.0035414117 0.0016206018 -0.0145888747 -0.0025159508 0.0015737960 0.0053988815 0.0004032955 0.0009439331 0.0038244320 0.0004322673 -0.0003788481 -0.0053018263 0.0002930361 -0.0009262805 0.0024386212 -0.0007662741 -0.0024957396 -0.0052817232 -0.0023857265 0.0060693538 0.0133573593 0.0026317173 -0.0004312546 -0.0071420015 0.0000840430 0.0001180146 0.0017648709 0.0000911174 0.0035003407 -0.0079947259 0.0024000048 -0.0053855109 0.0165444260 -0.0044441074 -0.0019674323 0.0067044008 -0.0053765378 0.0150387518 -0.0059991134 0.0170763247 -0.0186483032 -0.0251684069 -0.0282293214 0.0044831644 -0.0084041736 0.0213830191 -0.0062077040 0.0026825395 -0.0046516682 0.0512487519 0.0191083721 -0.0004024034 -0.0086577000 -0.0201057914 0.0094346545 -0.0154163715 -0.0167173916 0.0143549618 -0.0308779369 -0.0179904645 0.0098764710 0.1331293669 -0.0553556045 -0.0855282540 -0.0054995282 -0.0227685108 0.0031461227 0.0283108691 0.0351088677 -0.0144736268 0.0060425437 0.0512753255 0.0061803988 -0.0059288818 -0.0507015036 -0.0143264101 0.0143106536 -0.0433800041 0.0151498522 -0.0004153371 0.0233643565 -0.0008639935 -0.0206778233 0.0271430862 -0.0093118724 0.1379072732 0.0098548091 0.0633855582 0.0364159766 0.0206554488 -0.0128232358 0.0264950396 -0.0300012015 0.0169567448 -0.2132426902 -0.0406504793 -0.0554697877 0.1267909081 -0.1961326034 -0.1300526923 0.2373574576 0.2816111618 0.2470957284 -0.0340034384 0.0700566538 -0.0719556510 -0.0217336443 -0.0118827803 0.0180144823 -0.0041728810 0.0010726728 0.0078422941 -0.0055162042 -0.0059229364 -0.0089165492 0.0055995380 0.0056105390 0.0011909034 -0.0031632076 0.0005534707 0.0046725161 0.0121124831 -0.0003311623 -0.0129918635 -0.0229330322 -0.0279621904 0.0009495625 0.0254924640 0.0687411321 0.0380424659 -0.0140578857 0.0080263405 0.0470499565 -0.0100698049 0.0163123222 -0.0275629620 0.0172120336 -0.0165240979 0.0033864878 -0.0168283545 0.0203012896 -0.0030384960 0.0537822198 -0.1201658445 0.0452482119 -0.0089226377 -0.0123620019 0.0011458809 -0.0196253709 -0.0105043698 0.0120435864 0.0065960792 0.0101460729 0.0275138965 0.0128996166 0.0063721080 -0.0391965743 0.0184721043 0.0116136970 0.0127062869 0.0114573282 0.0038861426 -0.0190291653 -0.0478597024 0.0086231997 0.1491564442 -0.0089043484 -0.0960599895 -0.1260922046 -0.0308242045 0.0326258188 0.0921611788 -0.0283607359 -0.0411170947 -0.0945187915 -0.1423838970 -0.0925049039 0.0351125436 0.0147761333 0.0137511436 -0.0072794056 -0.0804281132 -0.0003332869 -0.0306665490 -0.0377177023 0.0317870674 -0.0057714031 -0.0381072288 0.0714731999 -0.0424972558 0.0039781384 -0.0039252448 0.0059926913 -0.0044691233 -0.0037592782 -0.0045746715 0.0015681618 -0.0030513916 -0.0009527706 -0.0016328497 0.0017374162 0.0028513173 -0.0036094796 0.0030432238 0.0008749988 -0.0002130017 0.0020891609 -0.0002105562 0.0127550305 -0.0023504464 -0.0125504947 -0.0051265375 0.0084656775 0.0137075419 0.0026258951 0.0039765766 0.0049914677 0.0078408492 0.0024896195 -0.0239724747 0.0010969674 -0.0037511930 -0.0006011338 -0.0053557612 0.0058420051 -0.0035366472 -0.0010430389 -0.0096819249 -0.0035917401 0.0185823984 -0.0039423018 -0.0045261712 -0.0078606071 0.0018912033 0.0082453827 -0.0020219813 -0.0006918223 0.0037828850 0.0004263523 -0.0009420917 -0.0016015392 -0.0193102188 0.0030634957 0.0097141167 -0.0179151037 -0.0012891292 0.0192553575 0.0095953389 -0.0099641526 -0.0186789988 -0.0471942062 -0.0133236690 0.0175041392 0.0053709561 0.0010970955 0.0037489418 0.0134625465 0.0091672273 0.0076873040 -0.0129350243 -0.0024957805 0.0034490860 0.0183828238 -0.0032638879 -0.0199247030 -0.0094177368 -0.0057263148 -0.0054151030 0.0871946882 0.0788166628 0.0154541834 0.0174550833 0.0176287415 -0.0024072446 0.0039070192 0.0013880328 0.0005571250 0.1017897825 0.0533256005 -0.0029889138 0.0365366200 -0.0191518601 -0.0379866037 -0.0076098212 0.0020818571 -0.0046762900 0.0201162381 -0.0195761003 -0.0126097095 -0.0201021772 0.0127669550 -0.0013058305 0.0086706729 0.0016151721 0.0094728044 0.0041991119 -0.0075936078 -0.0002945154 -0.0034705313 -0.0098596341 -0.0087653333 0.1200254001 -0.0598805759 0.0774707582 0.0050242672 -0.0040888176 0.0016808923 -0.0037262276 -0.0074823657 0.0172458360 0.1116437726 -0.0250331413 0.0740874263 -0.0001288219 -0.0005680468 -0.0007210916 -0.0003298234 -0.0005042257 0.0001576337 0.0002824217 0.0007980888 0.0013493417 0.0009482304 -0.0004517791 -0.0027706110 0.0034172314 0.0292909815 0.0009197662 0.0056373496 0.0331182042 -0.0003430602 -0.0121876118 -0.0444653854 0.0025598635 0.0024522620 0.0128920106 0.0005731248 -0.0414177527 -0.0411726894 0.0153117311 0.0787537726 0.1067125020 -0.0361934024 -0.0079322737 -0.0353617897 0.0015239080 0.0074914389 0.0120330083 -0.0032476290 -0.0021414556 -0.0385176928 -0.0065009136 -0.0133514768 0.0908194045 0.0141995018 -0.0047699122 -0.0335719553 -0.0004828086 -0.0056322762 -0.0278394191 -0.0019365347 0.0029194299 0.0353580588 -0.0010361780 0.0037020016 -0.0144096822 0.0032043967 0.0105340818 0.0359413775 0.0065731139 -0.0417190872 -0.0833817854 -0.0162022759 0.0013872306 0.0466944145 -0.0014406037 -0.0006691008 -0.0129129545 -0.0003803027 -0.0312960196 0.0535294335 -0.0198484820 0.0425656878 -0.1274514844 0.0333382102 0.0121879829 -0.0533235414 0.0289249144 -0.1097435279 0.0443592669 -0.1172061974 0.1095670642 0.1685999352 0.1998415081 -0.0366897774 0.0473641691 -0.1575808328 0.0333701990 -0.0388001930 0.0334507557 -0.2625715238 -0.0638359448 0.0689237718 -0.0095915365 0.1583493590 -0.0561887698 0.0656000520 0.0881069670 -0.1334751472 -0.0001087332 -0.0001485933 0.0000267899 0.0005958746 -0.0014312141 -0.0002494975 -0.0006918705 -0.0010992603 0.0001129918 0.0007813062 0.0018971773 -0.0001267314 0.0023080823 0.0001912493 -0.0010113133 0.0007063806 -0.0026647323 0.0013115318 -0.0015342781 -0.0032694682 -0.0004055702 -0.0073355623 -0.0045805956 0.0019749618 0.0089068989 0.0023029692 -0.0097426481 -0.0245745373 0.0001673545 -0.0513682447 -0.0010384927 0.0005378405 0.0000314232 -0.0017674451 0.0012517527 0.0000850300 0.0056654992 0.0009236157 0.0012760510 -0.0032615051 0.0048587319 0.0032405250 -0.0059362979 -0.0069045676 -0.0060969123 0.0002247767 -0.0002622275 0.0022749497 0.0041196115 0.0031442908 -0.0027573103 0.0004930308 0.0000807909 -0.0006487916 0.0007543339 0.0002686190 -0.0005307978 -0.0009604001 -0.0006220917 0.0006622939 0.0002810165 0.0000365866 -0.0004423084 -0.0009317834 -0.0000164508 0.0014309921 0.0011171477 0.0010893888 -0.0005719214 -0.0024712785 -0.0046261202 -0.0017541234 0.0018754942 -0.0010582372 -0.0047200794 0.0001980298 0.0017178124 0.0029345409 -0.0004163211 0.0006508693 0.0001247102 0.0003933997 -0.0010410547 0.0004131437 -0.0034868084 0.0081727398 -0.0048076957 0.0000498344 0.0004162970 0.0004044798 0.0004226572 0.0002196023 -0.0002777178 0.0000216785 -0.0001664490 -0.0007097271 -0.0003367708 -0.0000740577 0.0010615481 -0.0004516215 -0.0003724928 -0.0004358466 -0.0001777126 -0.0000392165 0.0003779391 0.0017664518 0.0000592003 -0.0047787402 0.0004033474 0.0021450535 0.0032385530 0.0009087739 -0.0005894844 -0.0032711671 0.0007926685 0.0009805179 0.0021492895 0.0030044775 0.0019710726 -0.0007731418 -0.0007978367 -0.0006109372 0.0003459203 0.0036600398 -0.0012185712 0.0005843797 0.0049270300 0.0177128612 0.0391748168 0.0015707609 -0.0029360753 0.0016230904 -0.0000869607 0.0001100542 -0.0003522849 0.0001902596 0.0001692233 0.0002294749 -0.0000971368 0.0002986191 0.0000362232 0.0001852227 -0.0002483683 -0.0000752468 0.0004399864 -0.0004826736 0.0003469875 -0.0000315840 -0.0001550698 0.0000359333 -0.0006296304 0.0001312772 0.0006083472 0.0002673555 -0.0003903885 -0.0006225511 -0.0004689759 0.0003775723 -0.0008891184 -0.0009069485 -0.0002990263 0.0019619718 0.0003402213 0.0006721962 -0.0008836244 0.0002788953 0.0001696915 -0.0008358135 -0.0024841353 -0.0015308679 -0.0000402370 -0.0033066763 0.0012543321 -0.0017492890 0.0006043562 -0.0001444265 -0.0006471809 0.0000476582 0.0001483299 -0.0001169797 -0.0000526442 0.0000889699 0.0001522166 0.0008124873 -0.0001729064 -0.0004511150 0.0007120624 0.0000782037 -0.0007939135 -0.0004237119 0.0004739154 0.0007801639 -0.0005785900 -0.0003923221 0.0004507484 -0.0002129026 0.0001227223 0.0000979684 0.0002001514 0.0001723955 0.0000591699 0.0004104877 0.0001129552 -0.0000378934 0.0002310590 -0.0000170942 -0.0002567233 -0.0001631912 -0.0001587718 -0.0002925716 0.0001142699 -0.0006157086 0.0005347951 0.0006535852 -0.0003191803 0.0001585448 -0.0001503944 -0.0000612573 -0.0000122472 0.0008719863 0.0000230374 -0.0000198448 -0.0000720458 -0.0002675981 -0.0003217626 -0.0509237476 0.0240236916 -0.0324349464 0.0430178373 -0.0417915942 -0.0157653733 -0.0009215111 0.0070650746 0.0141375641 -0.0457671183 0.0226708781 -0.0401209551 0.0479133592 -0.0487665089 -0.0065677945 -0.3300933555 0.2641437376 0.0794286548 0.4228649182 -0.1564510664 0.2921411513 -0.0014110746 -0.0004816236 0.0039121803 -0.4292090358 0.3393815067 0.1246951953 0.3565445847 -0.1218367922 0.2129986844 -0.0000171005 0.0000122406 0.0000393542 -0.0000315967 -0.0000016932 -0.0000292669 -0.0002983239 -0.0004391097 -0.0037203667 0.0016028932 -0.0015765537 -0.0042825670 -0.0001459077 0.0016071692 0.0003184724 -0.0000566079 0.0027329713 0.0002164529 -0.0008112663 -0.0028609936 0.0001191458 0.0003246954 0.0008156417 -0.0000569689 -0.0027998300 -0.0025472807 0.0014513162 0.0050928269 0.0067761670 -0.0024783596 -0.0003400436 -0.0022326838 0.0001405829 0.0006437506 0.0007262017 -0.0003777796 0.0017818562 -0.0029011575 -0.0027650877 -0.0007081398 0.0067549932 0.0014260966 -0.0000145125 -0.0010264136 -0.0002928514 -0.0003741518 0.0014418469 -0.0005532334 -0.0002296694 -0.0004420715 -0.0001211121 0.0004739308 0.0009047773 0.0002687471 0.0014080326 -0.0006699070 0.0019584773 0.0018684483 0.0023654715 0.0000733828 -0.0008395558 0.0003314529 -0.0000983201 0.0012292583 -0.0013232414 0.0006354947 -0.0025097193 0.0004889736 -0.0038215337 0.0029765519 -0.0071524108 0.0031093245 -0.0004618805 0.0021271338 -0.0010781032 0.0042966396 -0.0017004221 0.0046534301 -0.0043061947 -0.0066768558 -0.0078379548 0.0014790229 -0.0017352600 0.0061749914 -0.0015273815 0.0014078675 -0.0011906320 0.0111686939 0.0021903004 -0.0029826213 0.0003777969 -0.0062025793 0.0021168572 -0.0021738286 -0.0024218342 0.0044478357 0.0000614989 0.0004689635 -0.0007127984 -0.0002350268 -0.0002124793 -0.0012689762 0.0003207421 -0.0004325303 -0.0001092090 -0.0002434030 -0.0002272636 0.0002646436 0.0008391474 -0.0013399850 -0.0004757466 0.0014390323 0.0018905615 0.0012359033 -0.0006513737 0.0004760135 -0.0003919685 -0.0000825715 -0.0005857258 0.0001533257 0.0009037066 -0.0008532981 0.0000907475 -0.0054688737 0.0000036237 -0.0033898068 -0.0039954497 -0.0017686037 0.0013897102 -0.0028759270 0.0025652255 -0.0012941117 0.0150335329 0.0037842335 0.0036031248 -0.0080379992 0.0112453861 0.0081209571 -0.0175942907 -0.0195750041 -0.0165185608 0.0591545222 -0.1568733797 -0.0401371235 -0.4248101903 -0.3265568287 0.2614933487 -0.0418810321 -0.0134834812 0.0493408478 -0.0561347319 -0.0136908955 0.0779692374 0.0801908487 0.0379932113 -0.0806277152 -0.0088217440 0.0066596573 0.0324292930 0.0567780333 -0.0056961911 -0.1219362988 -0.0405587477 0.0003748134 0.0662438504 0.1611894589 0.2046728322 0.0280923096 -0.1421448625 0.1004169109 0.3407844265 -0.0021736697 -0.2925710153 -0.2573567110 -0.0156943006 -0.0077882057 -0.0225219466 0.0201058077 0.0235528379 -0.0197464398 0.1315873666 -0.2291532257 0.1061147111 0.0015911975 -0.0063539013 -0.0190776712 -0.0069387636 -0.0057693285 -0.0037336208 -0.0030705101 0.0027833483 0.0138469611 0.0044237990 -0.0032770532 -0.0151926638 0.0042825439 0.0073935685 0.0127687285 0.0042640042 0.0022561253 -0.0010465150 -0.0378801661 -0.0071045922 0.1025592985 -0.0300087407 -0.0239687804 -0.0712217617 -0.0222738958 0.0017170661 0.0845401931 0.0069484064 0.0074554255 0.0040699751 -0.0583500869 -0.0395334758 0.0055678303 0.0214071318 0.0174758409 -0.0046907861 0.1053122140 0.0945396037 -0.0554832883 0.0013223270 -0.0006432263 0.0008709730 -0.0173798801 0.0298168288 -0.0219760400 0.0061858752 -0.0021919280 -0.0023690446 -0.0015290440 -0.0008286238 -0.0000755858 0.0002494360 0.0007559641 -0.0004003062 -0.0002549126 -0.0003713714 0.0004336871 -0.0005830197 -0.0000765838 0.0002898239 -0.0000466414 -0.0002080743 0.0002677470 0.0085819136 -0.0044762071 -0.0104813751 -0.0059704536 0.0069900558 0.0112695226 0.0009202487 0.0005039832 0.0010042659 0.0006775936 -0.0003893322 -0.0000155696 -0.0001679989 0.0008253926 -0.0004183881 0.0001378849 -0.0008415776 0.0016909738 0.0054578848 -0.0018475152 -0.0002230803 -0.0011820092 0.0001655800 -0.0016634989 0.0003523215 -0.0000127230 -0.0008824855 0.0004827984 0.0004181195 -0.0009910412 -0.0002135740 0.0005288200 0.0006319336 -0.0175640212 0.0037121211 0.0128342343 -0.0133688925 -0.0015067349 0.0143194199 0.0036640326 -0.0056873988 -0.0072607999 0.0008844579 0.0016522041 0.0023448964 0.0025807456 0.0006802467 -0.0013081181 -0.0033910713 -0.0019957872 -0.0006887811 0.0020430881 0.0009815302 0.0008209600 0.0021113479 0.0004259702 -0.0020972241 -0.0032349606 -0.0023067594 -0.0011491165 0.0216748219 0.0086922549 0.0039629057 -0.0261512373 -0.0028274310 0.0200670579 -0.0004824213 -0.0005538983 -0.0003814688 0.0232450061 0.0092609325 0.0041906825 -0.0195243139 -0.0023101234 0.0124318838 -0.0009983308 0.0003595987 -0.0008310179 0.0002132765 -0.0003117662 0.0000178270 0.0016272676 -0.0008267543 0.0004796643 -0.0011433452 0.0003965239 -0.0009196029 0.0008276297 -0.0004270788 0.0002186891 -0.0069108277 0.0062584322 0.0015229214 0.0034760140 -0.0005905232 0.0019311311 -0.0004790824 0.0002422888 -0.0000282495 -0.0092635850 0.0085833388 0.0024589075 0.0021830439 -0.0018699323 0.0020435001 -0.0001344582 -0.0000552273 -0.0006894582 0.0000642532 0.0005105058 0.0007747455 -0.0000541544 -0.0000563509 -0.0003407857 -0.0000749015 0.0000904476 0.0002169587 0.0000338188 -0.0002030170 0.0000249766 0.0000151722 -0.0002614856 -0.0000912215 0.0000108981 0.0002168296 -0.0000287264 -0.0000283051 -0.0003100753 -0.0000251021 0.0000234077 0.0002820551 0.0003874009 -0.0012363730 -0.0018978926 0.0006888518 -0.0000588728 0.0002072443 0.0000654118 0.0000846408 0.0001463221 -0.0000339924 0.0001257272 0.0001689937 -0.0000375888 -0.0000780678 0.0010116668 0.0002763330 -0.0003827586 0.0003236835 -0.0002421117 -0.0000520849 0.0006337856 -0.0000925076 -0.0000137343 -0.0005851463 0.0000414674 0.0000631856 0.0001635434 0.0000312824 0.0009742055 -0.0007053309 0.0007227214 0.0006135261 0.0009646655 0.0001928994 0.0001214926 -0.0007319385 0.0001247172 -0.0000136869 0.0002471602 -0.0000166068 0.0014240612 -0.0009526040 0.0007355141 -0.0011346939 0.0030700533 -0.0007357642 0.0026242129 -0.0217689500 0.0143531912 -0.0448390100 0.0148574703 -0.0489636147 0.0604964134 0.0758559418 0.0813498447 -0.0059947386 0.0295816314 -0.0583224538 0.0116998412 -0.0109902070 0.0169854365 -0.1096632330 -0.0313108192 0.0215803297 0.0230879209 0.0568647550 -0.0288819815 0.0101228804 0.0210454424 -0.0436474940 -0.0039319809 0.0091466391 -0.0096956931 0.0201298608 -0.0080960815 -0.0533136057 0.0077496466 -0.0065159141 0.0009836155 -0.0027305227 -0.0052441733 0.0011260737 -0.0034909455 -0.0007516587 0.0016468147 -0.0014077128 0.0029201154 -0.0004392919 -0.0005901477 0.0028036939 -0.0006298315 0.0003909318 -0.0024991756 0.0001391596 0.0006000723 -0.0007268609 0.0002820184 -0.0056720047 -0.0019460848 -0.0026803912 0.0007935548 -0.0000532682 0.0003369395 0.0030256671 -0.0008012231 -0.0018530961 0.0011820672 -0.0000810108 0.0001361685 -0.0013461642 0.0021783725 0.0011497089 -0.0015276110 -0.0018787660 -0.0017955109 -0.0031259099 0.0086558920 -0.0001229287 0.0139123277 0.0101753887 -0.0086312630 0.0014427287 0.0002290667 -0.0018281107 0.0020831585 0.0003563208 -0.0020917467 -0.0022913450 -0.0010375654 0.0022610959 0.0004480389 -0.0011280686 -0.0007404529 -0.0028238070 0.0011321077 0.0036998861 0.0011769644 -0.0004200665 -0.0021132341 -0.0040818039 -0.0049833763 -0.0001910076 0.0013908440 -0.0013735341 -0.0141562694 0.0116147534 0.0021073611 0.0157346917 -0.0000925437 0.0006214953 0.0011492790 -0.0001341079 -0.0017467321 0.0007780387 -0.0069226716 0.0158364472 -0.0107265269 0.0004477037 0.0007988503 0.0007202300 0.0012129713 0.0003944710 -0.0000690452 -0.0003118792 -0.0007808193 -0.0018172464 -0.0008152824 0.0002712641 0.0020882685 -0.0011915945 -0.0003844416 -0.0012370581 -0.0007355225 -0.0002734416 0.0010961606 0.0041041714 0.0008248311 -0.0140007201 0.0039742874 0.0035469685 0.0099556898 0.0059180737 -0.0046829850 -0.0090528322 0.0019066352 0.0033252264 0.0063889664 0.0060760246 0.0051519325 -0.0013050283 -0.0004715322 -0.0002324790 0.0002735436 -0.0036301544 -0.0037946636 0.0022591499 0.0014979173 -0.0013929904 0.0006827394 0.0017881158 -0.0030789958 0.0021434261 -0.0001749166 -0.0000236516 -0.0003872646 0.0001057953 0.0000909577 0.0001408799 0.0000400896 0.0001222481 0.0000946220 -0.0000090185 -0.0000679854 -0.0001046949 0.0001185054 -0.0001345842 -0.0000336434 -0.0000559424 -0.0000752120 -0.0000418329 -0.0008017647 0.0002742860 0.0008846444 0.0004657388 -0.0004821956 -0.0008814948 -0.0000346764 0.0000055533 -0.0001275970 -0.0000984376 -0.0000947377 0.0007321228 -0.0000079434 0.0001522894 -0.0001889437 0.0000475397 0.0001164063 -0.0003263425 -0.0007745823 0.0004367911 0.0001405833 -0.0006086763 0.0000876927 -0.0000783725 0.0003860547 -0.0001196283 -0.0002646285 -0.0001165099 0.0001110826 0.0001397277 0.0000979869 0.0000138653 0.0000095961 0.0008927926 -0.0002703316 -0.0005415195 0.0007419516 -0.0000413784 -0.0009563507 -0.0001690174 0.0003123039 0.0005429777 0.0009547898 0.0203100707 0.0369087669 0.0561143489 -0.0002518599 -0.0513190900 -0.0561869333 -0.0329538367 -0.0087758956 -0.0234290118 0.0010610649 0.0219796279 0.0503002118 0.0082184772 -0.0408266775 -0.0575486520 -0.0252848834 0.0111636888 0.3779091990 0.1589999374 0.0272837960 -0.3796623745 -0.0072912389 0.2471514918 0.0084109016 -0.0020141620 0.0018529920 0.5518010175 0.2676934143 0.0964899615 -0.3709372580 -0.0175224131 0.2673627557 0.0002447489 -0.0000403871 -0.0000363766 -0.0006062800 0.0005700078 0.0003396028 0.0006022204 -0.0003533549 0.0001309607 -0.0005407682 0.0000900552 -0.0005508372 0.0001029332 0.0000327696 -0.0001502787 -0.0009109918 0.0004697259 0.0005997347 -0.0034307467 0.0015612078 -0.0020683541 -0.0001282749 0.0000894763 -0.0000530652 -0.0024923557 0.0019941605 0.0002402124 -0.0025346846 0.0002505259 -0.0018454022 0.0008763849 -0.0004714665 -0.0127064083 0.0018708566 0.0014234634 0.0032313280 -0.0000145965 -0.0000317896 -0.0001181877 -0.0000267123 0.0000367180 0.0001297509 -0.0000431425 -0.0032488014 -0.0008460413 -0.0037779336 -0.0039792913 0.0015673260 0.0037983138 0.0055013833 -0.0011102421 -0.0032409228 -0.0027991615 0.0013407585 0.0189335022 0.0021355230 -0.0130150111 -0.0228175549 -0.0275591791 0.0115043627 0.0012185247 0.0053100368 -0.0002507323 -0.0002703554 -0.0006294067 0.0001067887 -0.0014296365 0.0063558008 0.0029919517 0.0034883121 -0.0158740392 -0.0039265414 0.0010486554 0.0040848499 0.0002191740 0.0010656479 0.0028071938 0.0005679744 -0.0007985971 -0.0037931176 0.0000064783 -0.0004123164 0.0013057746 -0.0004194784 -0.0041181336 -0.0036414530 -0.0041613864 0.0048748969 0.0098307981 0.0026004308 -0.0000364334 -0.0048900495 0.0002003871 -0.0001141466 0.0016312281 -0.0000942306 0.0046600588 -0.0056764701 0.0030311031 -0.0055840473 0.0162504684 -0.0043327392 -0.0005528062 0.0021653587 -0.0012453042 0.0043533983 -0.0021525117 0.0040906595 -0.0050301173 -0.0072181864 -0.0082559359 0.0012799564 -0.0022631586 0.0065302206 -0.0012772130 0.0013356877 -0.0013531734 0.0106016477 0.0023803532 -0.0027283154 -0.0008010289 -0.0055636153 0.0023971532 -0.0021033443 -0.0027843500 0.0043996878 0.0010549765 0.0005889805 -0.0006041848 -0.0053560222 0.0012622219 0.0031590523 0.0000914978 -0.0000205580 -0.0002184077 -0.0006854091 0.0000600995 0.0003012841 0.0016895750 -0.0026615246 -0.0010130709 0.0014249567 0.0009060826 0.0014252904 -0.0004719475 -0.0001209917 -0.0004186054 0.0002667949 -0.0000504543 0.0003039165 0.0006616496 -0.0005472392 0.0000691220 -0.0034608044 0.0003781735 -0.0022532251 -0.0057761732 -0.0026416066 0.0014929316 -0.0043990024 0.0038769765 -0.0018903511 0.0223915636 0.0026253606 0.0044273705 -0.0140750592 0.0209290814 0.0145166215 -0.0239272627 -0.0265157953 -0.0241185265 0.0329708572 -0.1253844487 0.1017987983 0.1908394667 0.1385733213 -0.1198046136 0.0180726863 0.0032129134 -0.0267066339 0.0156248428 0.0028112526 -0.0366156738 -0.0261426451 -0.0096356805 0.0302856237 -0.0029433461 -0.0018490425 -0.0016202672 -0.0190953149 0.0030146708 0.0483542582 0.0174206967 -0.0001345597 -0.0241813269 -0.0457673790 -0.0472655033 0.0051135470 0.0239018770 -0.0233715229 -0.0536679048 -0.0154500227 0.1051925132 0.0828321856 0.0178258039 -0.0086010427 0.0082882027 -0.0297526847 0.0530705623 -0.0305158913 0.1536106039 -0.5304979194 0.4702898764 0.0166626824 -0.0079564294 -0.0140902457 0.0012101110 0.0010435641 0.0012400889 -0.0140259663 -0.0033693420 0.0039098560 -0.0017748946 -0.0029174693 -0.0086301074 0.0007561015 0.0027217860 0.0072407933 -0.0032009472 -0.0031830755 -0.0013799124 -0.0336193624 -0.0282307380 0.0824154747 -0.0093399437 -0.0323211719 -0.0372054732 -0.0113837557 0.0052898691 0.0313954751 -0.0016165613 0.0061475668 0.0070740607 -0.0038917548 -0.0055760719 0.0034574558 -0.0076389112 -0.0062851392 -0.0001922138 -0.0325547221 -0.0522979115 0.0323558698 0.0005173545 -0.0001653003 0.0002754984 -0.0514796156 0.0744296193 -0.0639317174 0.0088288575 -0.0034795307 0.0011256293 -0.0025600821 0.0002529291 0.0003891416 0.0000764700 -0.0000365037 -0.0013172350 -0.0004181602 -0.0001663111 0.0015217361 -0.0013208386 0.0005712219 0.0008313292 0.0002373477 0.0001259867 0.0006767791 0.0197826316 -0.0089256056 -0.0233408792 -0.0117064769 0.0142972140 0.0240543682 0.0017721789 0.0010802486 0.0025034696 0.0017211531 0.0000590979 -0.0061303313 -0.0002313717 0.0005801712 0.0003308101 -0.0003271579 -0.0014230735 0.0030249476 0.0116483953 -0.0047781775 -0.0007013859 0.0021663894 -0.0004377321 -0.0027710653 -0.0019932505 0.0007917310 0.0000504819 0.0012205912 0.0000884674 -0.0019182808 -0.0012835333 0.0005808217 0.0008558104 -0.0323433355 0.0068712435 0.0179383257 -0.0268847457 -0.0025474735 0.0301133054 0.0084084062 -0.0115888489 -0.0185588810 0.0016100652 0.0006467537 0.0003387655 0.0007683629 -0.0001661706 -0.0018679949 -0.0014952167 -0.0010066234 -0.0008390124 -0.0014077245 -0.0001098525 0.0007108520 0.0003673954 0.0007748035 0.0001083129 -0.0005188288 0.0000569331 0.0007881032 0.0016052024 -0.0026096082 -0.0009757742 -0.0017727144 -0.0023755658 0.0003290738 0.0000717770 -0.0004266558 0.0003807454 0.0136229363 0.0041246555 0.0051279369 -0.0107305784 0.0008925520 0.0089793897 -0.0006264513 0.0004491799 0.0001520351 0.0003285469 -0.0001775552 0.0002164233 -0.0000281367 0.0001398551 -0.0000418385 -0.0004557544 0.0000434799 -0.0005243569 0.0003839282 -0.0004447687 -0.0003092497 -0.0050249869 0.0059036217 0.0018295427 0.0054326276 -0.0014703521 0.0042018972 -0.0000535356 -0.0001253439 0.0000867935 -0.0004537864 0.0009085350 -0.0006678399 -0.0014183514 0.0001337858 -0.0019852492 0.0002301940 0.0002385435 -0.0004391294 0.0001872465 0.0003713479 -0.0004509525 0.0000465776 0.0000268212 -0.0000217251 0.0000411089 0.0000255227 -0.0000560600 -0.0001575761 -0.0002834104 0.0001498204 -0.0003528866 0.0003845357 0.0002344244 0.0000067642 -0.0000016781 -0.0000594645 -0.0000075991 -0.0001367603 -0.0000003863 0.0001495465 0.0000447953 0.0003144885 -0.0009047434 -0.0012725688 0.0004556549 0.0000221432 0.0000511133 0.0000080114 0.0001896746 0.0001008827 -0.0001241812 0.0018184465 -0.0003698104 -0.0013294148 -0.0000055979 0.0014456122 0.0004586583 0.0000649131 0.0004008592 0.0000697759 0.0003356354 0.0004568599 0.0001175304 -0.0002219070 -0.0004747898 -0.0001226293 0.0001148070 0.0001129078 0.0000688289 -0.0007531257 -0.0004322674 -0.0000629506 0.0005499036 0.0007079965 0.0001294112 -0.0000105975 -0.0007027938 0.0000553521 0.0000008040 0.0002918431 -0.0000098520 0.0003733415 -0.0008459545 0.0000652483 -0.0012816107 0.0036067965 -0.0008978077 0.0141910200 -0.0536396424 0.0364138015 -0.1054662057 0.0507941311 -0.1009261824 0.1395574442 0.2041587569 0.2279617569 -0.0241821146 0.0607250396 -0.1500308877 0.0351736689 -0.0266081236 0.0371977978 -0.2703487686 -0.0713214051 0.0552694476 0.0433164651 0.1434952784 -0.0661229567 0.0392969293 0.0607700680 -0.1081058492 0.0005627586 0.0002372591 -0.0002821220 -0.0028877911 0.0002298142 0.0014131850 -0.0005114487 -0.0003207451 0.0001658969 0.0001138013 -0.0001514851 -0.0000900798 0.0007604572 -0.0011746547 -0.0005470677 -0.0024388128 -0.0038010411 0.0002882560 -0.0027042697 -0.0007088616 -0.0017829293 0.0043283623 -0.0020044184 0.0012553162 0.0011995772 -0.0040878791 -0.0007407838 -0.0030953104 -0.0011682961 -0.0006032372 0.0026187246 0.0014961028 0.0015733172 -0.0011366895 0.0008472758 0.0002313517 0.0041317854 0.0012188734 0.0009271917 -0.0025277932 0.0032299435 0.0023298537 -0.0048985853 -0.0056087291 -0.0045288380 0.0004116495 -0.0000517506 -0.0002461556 -0.0046520063 -0.0036555661 0.0028692185 -0.0004879625 -0.0002157942 0.0005335247 -0.0004229547 0.0001680574 0.0010697012 0.0006037141 0.0005491519 -0.0004299468 -0.0000594655 -0.0002522063 -0.0001726805 0.0002944128 0.0001630467 -0.0007015796 -0.0001934123 -0.0003005943 0.0002954388 0.0021382665 0.0028624090 0.0014773106 -0.0000129636 -0.0002434713 -0.0006089678 0.0011212753 -0.0017666214 -0.0006574550 -0.0000239617 0.0002740077 -0.0005141367 0.0005138884 -0.0013417246 0.0006352220 -0.0028791123 0.0085001780 -0.0069214037 -0.0001709562 0.0003518662 0.0001257911 0.0003123840 0.0001725105 -0.0001357691 0.0001048369 -0.0001443486 -0.0005785208 -0.0001164231 0.0000759346 0.0005303159 -0.0003986449 -0.0002010915 -0.0000496946 -0.0000252073 0.0000639771 0.0002872494 0.0016468180 0.0001154418 -0.0042264769 -0.0000326681 -0.0003791856 0.0004497648 -0.0003093815 -0.0009657510 0.0009309300 0.0009309217 0.0008511360 0.0018786888 0.0029166797 0.0018967992 -0.0006292201 0.0002826074 0.0003348048 -0.0000772596 -0.0006881393 -0.0016418822 0.0015815205 -0.0048617312 0.0066954883 -0.0020457942 0.0008695477 0.0002526462 0.0013034739 0.0001855516 0.0008656272 0.0010387563 0.0000362102 -0.0000090300 -0.0007475755 -0.0005990498 -0.0010740100 0.0005805987 -0.0007652244 0.0000137579 0.0006964237 0.0021230002 0.0008487211 0.0004921013 -0.0000084162 0.0008172775 -0.0002902153 -0.0000314490 0.0000094141 0.0000515219 -0.0002502510 -0.0001926704 -0.0002425879 0.0001034966 0.0087301221 -0.0032564056 0.0070426396 0.0003672297 -0.0097214108 -0.0001758587 -0.0046664871 0.0015637074 -0.0031776474 -0.0033827657 -0.0020621910 -0.0115986824 -0.0090806173 -0.0029271051 -0.0020325269 0.0028411333 -0.0034094226 -0.0003312091 0.0004992673 0.0007590024 -0.0001436981 -0.0017216509 0.0001214147 0.0020896654 -0.0031384408 -0.0024263507 0.0009254906 0.0002446880 0.0005669192 0.0012556907 0.0001110439 -0.0010514454 -0.0007248333 0.0003889712 0.0017558234 0.0011285303 0.0004078826 -0.0000705292 0.0000438288 0.0002152291 0.0003021953 -0.0006034850 -0.0002044710 -0.0001026923 0.0020166270 0.0005829513 -0.0003766645 -0.0000613493 0.0000072994 0.0000050129 -0.0004173183 -0.0004787742 -0.0004747774 -0.0001079490 -0.0003691901 0.0003941404 -0.0052156082 -0.0006585990 0.0044645232 -0.0004888885 -0.0001709079 0.0001035753 -0.0023350856 -0.0016025909 -0.0005632121 -0.0031653387 -0.0002983910 0.0016922850 0.0243579444 0.0221989508 0.0905722801 0.0066658706 0.0174246141 0.0273394777 -0.2064088761 0.1217810784 -0.0417706390 -0.0014658893 -0.0180785577 -0.0292445075 0.0166925465 -0.0520504187 -0.0799361156 -0.0566765880 0.1275650689 0.1292769435 0.4556184030 -0.1403779290 0.4342367074 0.0452151763 -0.0253599937 0.0103002756 0.4403073519 -0.4072971795 -0.2339685597 -0.0848577371 -0.0361322059 -0.1585051909 -0.0000522934 0.0000482808 0.0003482976 -0.0002032847 -0.0000666743 -0.0003255109 0.0141825774 0.0075895735 0.0662411160 0.0207351688 -0.0274768743 -0.0603952157 -0.0004661907 0.0009546638 0.0003754448 0.0002369808 0.0013962737 0.0000993453 -0.0006759263 -0.0014844680 0.0002248084 0.0004048354 0.0004130206 -0.0001581837 -0.0035485215 -0.0008738494 0.0019887091 0.0044186941 0.0054261794 -0.0021220342 0.0001774547 -0.0014483814 -0.0000528748 0.0000553547 0.0005934983 -0.0000286758 0.0031832227 -0.0023309445 -0.0032215171 -0.0013159358 0.0066136087 0.0017567650 -0.0035361562 0.0056004257 -0.0024651426 0.0026718922 0.0061578087 0.0021069388 -0.0029188795 -0.0083703132 -0.0008514808 0.0014199583 0.0017423274 0.0006519993 -0.0095857193 -0.0083953500 -0.0076516876 0.0166851544 0.0252757884 0.0082303631 0.0020713316 -0.0090438711 0.0014443561 -0.0021482441 0.0041891714 -0.0013484705 0.0268487011 -0.0121316138 0.0167661487 -0.0201192947 0.0522609550 -0.0149078955 -0.0001202952 -0.0000051587 -0.0009273935 0.0003827999 -0.0001973881 0.0004463674 -0.0019780425 -0.0021028674 -0.0020605803 -0.0008709279 -0.0015180401 -0.0002350036 -0.0002274971 -0.0001820936 -0.0006837564 0.0014990326 0.0023802603 0.0015763355 -0.0023662262 -0.0000408478 0.0004047831 -0.0009851385 -0.0026221698 0.0024193268 0.0096699005 0.0003370926 -0.0067840600 -0.0560546473 -0.0086857016 0.0205871277 -0.0216898803 -0.0157050352 0.0083395604 -0.0008045092 -0.0246799770 -0.0038135450 -0.0027063095 -0.0100010941 0.0008448903 -0.0006767314 -0.0090401363 -0.0004808691 -0.0058717034 -0.0222756188 -0.0036373242 0.0171056198 -0.0219567307 0.0078985831 -0.0098455961 0.0016581741 -0.0056884290 0.0603789590 -0.0278893542 0.0296400209 0.0088398840 0.0044024709 0.0016924659 -0.0060559923 0.0067156660 0.0014601586 -0.0017624708 -0.0013341272 0.0005585840 0.0009474345 -0.0011415955 -0.0002564299 0.0014052065 0.0016757977 0.0018580281 -0.0001898835 0.0004552172 0.0008560805 0.0083794769 0.0059588424 -0.0054738749 0.0008565396 -0.0000895781 -0.0012848460 0.0007655570 -0.0003824984 -0.0013867016 -0.0006053350 -0.0001770000 0.0008103297 0.0000506198 -0.0006466341 0.0009178473 -0.0021647729 0.0010912700 0.0010748002 0.0003944331 -0.0004151233 -0.0009584209 -0.0005278965 0.0007928204 0.0012375565 -0.0041479372 0.0025770481 -0.0003390060 0.0116086733 -0.0084767816 0.0088245725 0.0003336743 0.0002414599 0.0002166956 -0.0005946750 0.0000181207 0.0004484075 -0.0001183007 -0.0014778685 0.0013556980 -0.0003401720 -0.0000094610 0.0006928279 -0.0000475629 0.0001563530 0.0001680617 0.0001321062 0.0002419854 0.0004308786 0.0000927490 0.0000341236 -0.0007498453 0.0000891522 -0.0001159791 0.0003333847 0.0002536837 0.0000145741 -0.0008596387 0.0009675448 -0.0017785136 0.0023048666 -0.0004056669 -0.0015577537 -0.0024940888 -0.0024633591 0.0015084114 0.0028628496 -0.0003099688 -0.0024083366 -0.0028834140 0.0000831704 -0.0001962842 0.0002134203 0.0000091045 0.0000399410 0.0000065506 -0.0018820006 -0.0013753772 0.0005880842 -0.0279343579 0.0189317247 -0.0067547649 -0.0000445335 -0.0000282181 -0.0001210728 0.0001276488 0.0001834681 0.0001770102 0.0000143121 0.0000704931 -0.0000630988 -0.0000532448 -0.0001697718 -0.0000050116 0.0000565967 0.0000956801 -0.0000074151 -0.0002183943 0.0000634741 -0.0000988598 0.0000620381 0.0000701434 -0.0000270969 -0.0000155507 0.0000192650 -0.0000117983 -0.0000682335 -0.0001438001 -0.0000696539 -0.0000366401 -0.0002514197 0.0000682459 -0.0001678705 0.0001135584 -0.0004109853 0.0000020078 -0.0000457952 0.0001610997 0.0003381768 0.0001954195 0.0004487845 0.0008107201 0.0002173358 -0.0000040573 0.0008967370 -0.0002629092 0.0007420665 -0.0003534332 0.0000591343 0.0004117260 0.0000682489 -0.0001857415 -0.0000660183 -0.0000311279 0.0000134801 -0.0000451381 0.0003644189 0.0000066185 0.0001909300 0.0003283195 0.0003807802 -0.0002279283 -0.0004493726 0.0003476302 0.0005830320 0.0326240294 0.0138766444 -0.0050652571 -0.0000633579 0.0163292305 0.0349269550 -0.0176471045 0.0023863895 0.0101505309 0.1286650448 0.0367540956 -0.0285777729 -0.0005490631 -0.0091044285 -0.0129227509 -0.0234962826 -0.0302146837 -0.0350596290 0.0632293724 0.0586013313 0.0499737510 -0.3289029954 0.0017158813 0.2950768416 -0.0246198430 -0.0071632948 0.0075843457 -0.2597577026 -0.1481599763 -0.0908700521 -0.0562701846 -0.0370875522 -0.0055667082 -0.0043805632 -0.0008557456 -0.0085234986 0.0069690264 -0.0094774147 -0.0077721532 0.0087238358 -0.0052179555 0.0017415889 0.0088792639 -0.0003531806 0.0115344305 -0.0040279088 0.0052446387 0.0060868271 0.0298527444 -0.0401989592 -0.0243102172 0.0055647861 -0.0083897732 -0.0117701757 -0.0020554446 0.0011076826 -0.0004569162 0.0060910048 0.0014208179 0.0145887987 0.0339889052 -0.0037793260 0.0370295992 -0.0038550381 0.0032974611 0.0369336736 -0.0191943895 -0.0087913280 -0.0338154421 -0.0009603295 -0.0001545441 -0.0031394555 -0.0013006392 0.0014931221 0.0027641420 -0.0075535887 0.0389228873 0.0097493748 0.0237787713 0.0293427479 -0.0097965435 -0.0339682277 -0.0457122298 0.0144084441 0.0225208753 0.0226117941 -0.0096579136 -0.2390579857 0.0002328766 0.1353690644 0.2516324806 0.3065564385 -0.1167806989 0.0073697476 -0.0536788885 -0.0073751973 -0.0022849550 0.0129235804 0.0019567798 0.0833973406 -0.0771919171 -0.0779855854 -0.0445776154 0.1835898572 0.0476570985 -0.0144273828 0.0365788290 -0.0091631200 0.0186754135 0.0355810545 0.0098963968 -0.0233937937 -0.0491939892 -0.0078416517 0.0051177032 0.0103865426 0.0016563483 -0.0933690092 -0.0465494019 -0.0734460087 0.0942564635 0.1490289806 0.0476802816 0.0186154935 -0.0553255306 0.0134369069 -0.0149011379 0.0304208128 -0.0093414527 0.2389011107 -0.0806132422 0.1378764744 -0.1480383675 0.3886514500 -0.1106490603 0.0000567024 0.0000425332 -0.0000432246 0.0001871211 0.0001425526 0.0004629294 -0.0001377351 0.0000228138 0.0000708284 0.0001164967 -0.0001082687 0.0003108479 -0.0000389932 0.0000572807 -0.0000849211 0.0006368184 0.0002347922 -0.0000100019 -0.0002916680 -0.0000737512 0.0001412143 -0.0000284348 0.0000247874 -0.0000641968 0.0078197900 -0.0024968634 -0.0030911751 -0.0586403647 -0.0035951091 0.0309343596 -0.0191952380 -0.0115371261 0.0077533042 -0.0005115277 -0.0202344256 -0.0027910573 -0.0021236181 -0.0084179369 -0.0005673190 -0.0002867450 -0.0075952011 -0.0001220827 -0.0048354811 -0.0187531900 -0.0031060334 0.0142898605 -0.0181685880 0.0066273947 -0.0080648675 0.0012739727 -0.0047204850 0.0497488034 -0.0230410127 0.0243194217 0.0067958118 0.0035637473 0.0013207537 -0.0065097727 0.0062057993 0.0011936478 0.0008212006 -0.0008074483 0.0014158791 -0.0003381017 0.0004410260 0.0005836889 -0.0013161623 -0.0010849519 -0.0006538154 -0.0006223888 0.0022401266 -0.0031110456 -0.0121869424 -0.0087991749 0.0079716468 -0.0012246434 0.0000533613 0.0018273641 -0.0008065472 0.0006442204 0.0020915252 0.0007426693 0.0002492765 -0.0010765482 0.0000073008 0.0006634885 -0.0014247227 0.0026907564 -0.0011675675 -0.0013173198 -0.0006526176 0.0003628425 0.0012457527 0.0011176977 -0.0007287063 -0.0011386673 0.0064384423 -0.0041107586 -0.0031814114 -0.0123864484 0.0105074952 -0.0093349238 -0.0003326225 -0.0005002447 -0.0003748922 0.0009195686 -0.0003991361 -0.0002363241 -0.0012454274 0.0061582507 -0.0050399946 0.0002453251 0.0000156924 -0.0007417306 -0.0002902454 -0.0003865540 -0.0002541296 -0.0000431157 -0.0001856628 -0.0002698153 0.0000227951 0.0000384256 0.0009561262 0.0000800049 0.0001493241 -0.0007388428 -0.0001806302 0.0000823045 0.0010157217 -0.0015686539 0.0025841504 -0.0019506269 0.0017989728 0.0030112355 0.0050942019 0.0045116142 -0.0017594616 -0.0067818247 0.0006434953 0.0031084232 0.0036338938 -0.0032195675 -0.0021673964 0.0003024320 0.0000202547 0.0000988883 -0.0000141753 0.0034576278 0.0005306637 -0.0009564393 -0.0233495447 0.0158417194 -0.0056972248 0.0002863690 -0.0000337439 0.0004680614 -0.0002420588 -0.0001187069 -0.0000424734 -0.0000220937 -0.0001533948 -0.0000113341 0.0000616675 0.0001576293 -0.0000306589 -0.0000106246 -0.0000342744 -0.0000239517 0.0000766514 -0.0001216021 0.0000588777 -0.0000538830 -0.0000560458 0.0000369847 0.0000009426 0.0000475691 0.0000778116 0.0000928619 0.0000798073 0.0000034668 0.0000741448 -0.0003522142 0.0002400160 -0.0001433637 -0.0000650946 0.0005042779 -0.0000211280 0.0002429295 -0.0001138060 -0.0001207545 -0.0000725232 -0.0002106211 -0.0000897384 0.0002056524 0.0001404953 -0.0009085125 0.0002004888 -0.0003391104 0.0003174964 -0.0000517990 -0.0003262447 -0.0000363718 0.0001115078 0.0000038428 -0.0000429002 0.0000671204 0.0000934323 -0.0000908040 -0.0000213621 -0.0003882874 -0.0001825400 -0.0003102753 0.0001024395 0.0003976140 -0.0002999907 -0.0005071683 0.0273316707 0.0050911092 -0.0108906210 0.0092889717 -0.0238853560 -0.0593434504 -0.0003115418 -0.0206334550 -0.0254476748 -0.1707516680 -0.0486539547 0.0385808889 -0.0152278876 0.0167833440 0.0377467032 0.0365994850 0.0446355169 0.0521827775 -0.1439711233 -0.1346977247 -0.0958722169 0.3554105751 -0.0151542060 -0.3607914307 0.0336120589 0.0095609579 -0.0101039598 0.3065634327 0.1881297941 0.1380775282 -0.0037782760 0.0567466804 0.0880440953 -0.0035462293 -0.0004801904 -0.0064720819 0.0058890859 -0.0077892352 -0.0061763529 0.0059171675 -0.0035484364 0.0011712532 0.0073908557 -0.0004978170 0.0093438291 -0.0032826482 0.0040465450 0.0044926037 0.0233309318 -0.0316501466 -0.0188872189 0.0090625186 -0.0080381361 -0.0059504388 -0.0015046498 0.0008400205 -0.0003255815 0.0091786857 -0.0023569212 0.0099796897 0.0267903221 -0.0032353139 0.0291423174 0.0057576043 -0.0042524798 -0.0499716100 0.0264166987 0.0119364714 0.0451002734 -0.0006844141 -0.0000660781 -0.0019734813 -0.0009024376 0.0009636236 0.0017205715 -0.0068659444 0.0330984864 0.0077247506 0.0215717369 0.0247891157 -0.0090078376 -0.0297016748 -0.0388446514 0.0128791423 0.0201221590 0.0197635607 -0.0086624784 -0.2106111773 0.0018034395 0.1185650728 0.2196628899 0.2673027994 -0.1022527777 0.0059940608 -0.0460048214 -0.0061370839 -0.0019008034 0.0105662901 0.0016135578 0.0688346820 -0.0656371330 -0.0653670984 -0.0378822945 0.1553453136 0.0402744768 -0.0121449452 0.0302486049 -0.0076590182 0.0155753483 0.0296191344 0.0082354285 -0.0195368141 -0.0408555448 -0.0066183142 0.0042855536 0.0084594794 0.0014104924 -0.0771019885 -0.0387364454 -0.0604491413 0.0778990202 0.1228453813 0.0393125779 0.0155088791 -0.0458868281 0.0111799791 -0.0124120042 0.0253974981 -0.0077886860 0.1992402521 -0.0669811985 0.1148846213 -0.1235735947 0.3246008015 -0.0924675339 -0.0000939870 0.0000228026 -0.0001357629 -0.0000650161 -0.0002086076 -0.0003323558 -0.0004321767 -0.0008258861 -0.0008462360 -0.0002663748 -0.0001324337 -0.0003173264 -0.0001170990 -0.0001281798 0.0000127858 0.0001202242 -0.0003143972 -0.0002547998 -0.0001497983 -0.0002190010 0.0000857667 0.0001910163 0.0002048110 0.0000620836 -0.0000469263 -0.0003966176 -0.0000389850 -0.0008047244 -0.0003992426 0.0002720378 -0.0003824302 -0.0004037981 0.0001523309 -0.0004908353 -0.0001493044 0.0002582872 -0.0005644259 0.0012856942 0.0004531140 -0.0002707578 -0.0000458340 -0.0001222788 -0.0001250977 0.0002385224 -0.0000918418 -0.0002123316 0.0000907953 -0.0001023014 0.0000974213 0.0001379225 0.0000669994 -0.0009688150 0.0002032308 -0.0004979673 0.0003225501 0.0001870764 0.0000432604 0.0005987815 -0.0006135524 -0.0001182934 -0.0017583846 0.0012848173 0.0005369559 0.0021191862 -0.0037238083 -0.0023670760 0.0010271746 0.0014005716 0.0019533928 -0.0002015207 -0.0153114649 -0.0297164969 0.4109792523 0.3206324085 -0.2198952337 0.0365259880 0.0299178560 -0.0193974963 -0.0168742976 -0.0015347747 0.0275092036 0.0052718153 -0.0129367618 -0.0276217817 -0.0161258372 0.0082516701 0.0436383488 -0.0037887044 -0.0128566222 -0.0177270357 -0.0033005485 0.0061027015 0.0141337043 -0.1410904410 -0.3263254789 -0.2454833332 -0.2245357628 0.1419930331 0.5595768392 -0.0778832215 -0.2457307991 -0.1402144576 -0.0118921346 -0.0046473531 -0.0077193973 0.0127135874 0.0002404031 -0.0005075058 0.0160525207 0.0197325424 -0.0438128482 -0.0006854600 0.0004846768 -0.0027617449 0.0032456213 0.0022606415 -0.0008058803 0.0001147831 -0.0000732953 0.0004669920 -0.0007544483 -0.0019614140 -0.0027052243 -0.0011491967 0.0006311299 0.0054167858 -0.0006078766 -0.0007500806 -0.0008273817 -0.0037491801 0.0003451922 0.0079542516 -0.0183724756 -0.0141406218 -0.0308783041 -0.0233368405 -0.0022194314 0.0593950196 -0.0102293088 -0.0111241109 -0.0178732848 0.0390016066 0.0244913797 -0.0070407086 -0.0010688221 -0.0016236274 -0.0010255508 0.0365892024 0.0170450053 -0.0181895433 0.0001574292 -0.0001487861 0.0000697126 0.0037297588 -0.0043542953 0.0045229096 0.0012210411 -0.0005642683 -0.0021632742 -0.0000402973 -0.0000156279 0.0003507618 0.0002144960 0.0004316607 0.0001431800 -0.0001152045 -0.0001975341 -0.0001601568 -0.0000347242 -0.0002050399 -0.0001013826 -0.0001715520 -0.0002021046 -0.0000402807 -0.0015633296 -0.0003225559 0.0019152013 0.0004217297 0.0006319599 -0.0020892921 0.0002094762 0.0001549119 0.0000868889 0.0002936888 -0.0002908339 0.0015360568 -0.0000717473 0.0002886652 -0.0003957682 0.0001065771 -0.0000411135 0.0001533253 -0.0001042691 0.0002760298 0.0000282026 -0.0015229576 0.0002574412 -0.0001650028 0.0010449364 -0.0003015185 -0.0007604464 -0.0002247697 0.0003258720 0.0001755572 0.0002548088 0.0001500875 0.0001546206 -0.0043232792 0.0008194965 0.0077197111 0.0025834817 -0.0041222566 -0.0037360868 0.0025330649 -0.0025047243 0.0009709126 -0.0002710230 -0.0000218307 0.0001123468 0.0001699176 -0.0002551826 -0.0005848485 0.0001121782 -0.0001702236 -0.0001693161 -0.0017448493 -0.0005337394 0.0004856506 0.0000626368 0.0001619886 0.0001537356 0.0002100784 0.0003697608 0.0004924751 -0.0003986138 -0.0003892978 -0.0007829690 0.0040847067 -0.0015264311 -0.0025709639 0.0002575110 0.0001174159 -0.0002487767 0.0045681660 0.0025605909 0.0014753175 -0.0001181820 0.0003054544 0.0009014757 0.0002438031 -0.0000260103 0.0003007766 -0.0001421054 0.0001755358 0.0001138468 -0.0007368172 0.0004362833 -0.0001305593 -0.0000581572 -0.0000526192 -0.0001477014 0.0000994436 -0.0001552777 -0.0002603227 0.0005511227 -0.0003254957 0.0002210505 0.0005313061 0.0000456357 0.0006713990 0.0001256182 -0.0000296851 0.0000311486 0.0010909085 -0.0010102809 -0.0007056538 -0.0002244776 -0.0004047254 -0.0002374896 0.0000404310 -0.0001035716 -0.0007185681 0.0003910551 0.0003289121 0.0008431758 0.0000560424 0.0000180417 0.0002987130 0.0000954536 -0.0001491370 -0.0002660074 0.0008070056 0.0003064794 -0.0004000840 0.0006870152 -0.0006379375 -0.0004774767 -0.0007556966 -0.0000125509 0.0004469265 0.0006595932 0.0005245419 -0.0003116205 -0.0085261973 0.0018628334 0.0049018928 0.0060734818 0.0072580395 -0.0028358052 -0.0002828652 -0.0001009091 0.0001451488 0.0002487728 -0.0004079374 -0.0001449272 -0.0035953907 0.0007044482 0.0026412434 0.0012255232 -0.0048697904 -0.0014955903 0.0003951730 0.0001034854 0.0002060913 0.0001588828 -0.0002378734 0.0000908268 -0.0000022875 0.0001587976 0.0000015865 0.0000752902 0.0000859044 0.0000199030 -0.0007998574 0.0002534077 -0.0007711959 0.0005950276 0.0010040229 0.0004054757 -0.0003238439 0.0001889451 -0.0001928349 0.0002290425 -0.0003236191 0.0001446557 -0.0038049101 0.0005389569 -0.0021585689 0.0016714180 -0.0041970895 0.0012173492 -0.0016905684 0.0027332112 -0.0019857104 0.0047783510 -0.0049950064 0.0014296727 -0.0059337845 -0.0101125038 -0.0125827449 0.0027691438 -0.0017187374 0.0090743848 -0.0026451011 0.0013723873 -0.0011164773 0.0141661621 0.0029518833 -0.0029849799 0.0013299987 -0.0073418567 0.0017260456 -0.0040712725 -0.0041350221 0.0053841454 0.0112026529 -0.0153693329 -0.0084925585 -0.1427004697 0.0255324097 0.0741097497 -0.0236083216 0.0009031430 0.0112115132 -0.0233632369 -0.0251974882 0.0133930526 -0.0136523914 -0.0102779763 0.0034483105 -0.0093925760 0.0152553049 -0.0023842183 -0.0126041421 0.0309724151 -0.0128703907 -0.0223218770 0.0059181264 -0.0100775968 0.0151191871 0.0106971044 0.0088220504 -0.1429842033 0.0219415173 -0.0764547364 0.0027147210 -0.0025228679 0.0007381467 0.0040308315 0.0011352723 -0.0012162996 0.0000492167 0.0001115336 0.0001047078 -0.0003595404 0.0003670974 0.0001071960 -0.0006210747 -0.0005034865 -0.0004078201 -0.0003367157 0.0015923361 -0.0005392225 -0.0069798685 -0.0054829954 0.0037068332 -0.0006000669 -0.0005374874 0.0002937097 0.0003913349 0.0001439534 -0.0003032786 -0.0001010491 0.0001845105 0.0004338287 0.0002675902 -0.0002660740 -0.0007855382 -0.0000635132 0.0003691329 0.0004103537 0.0000502565 -0.0001080657 -0.0002319046 0.0022983332 0.0054164731 0.0040327337 0.0040163926 -0.0026378505 -0.0109531010 0.0028686045 0.0035815102 0.0036298119 0.0001483056 -0.0000017534 0.0001635349 -0.0001132678 -0.0001117874 0.0000096420 -0.0005714023 0.0006648105 -0.0000326842 0.0000003870 0.0000235003 0.0000949061 0.0003882498 0.0003071551 -0.0000317143 -0.0000450484 -0.0000567932 -0.0000583341 -0.0000483707 -0.0000710738 -0.0000472978 -0.0001631322 -0.0000596804 0.0003002086 -0.0000990786 -0.0001206805 -0.0002271992 -0.0002356232 -0.0000447231 0.0003110709 -0.0008824325 -0.0009419272 -0.0015044533 -0.0017081894 -0.0002734365 0.0040750510 -0.0012766539 -0.0014887178 -0.0023656104 0.0044577674 0.0026462132 -0.0006865843 0.0000496128 0.0000451291 0.0000787502 -0.0008825510 -0.0002721434 0.0003267789 0.0290693377 -0.0233490764 0.0112283041 -0.0000073019 -0.0000569839 0.0000210563 -0.0000508962 -0.0000021839 0.0000450716 -0.0000023606 0.0000074871 -0.0000107420 -0.0000010129 -0.0000282830 0.0000124613 -0.0000113843 0.0000011502 0.0000004706 0.0000412080 0.0000430140 -0.0000030274 0.0000131682 0.0000030730 -0.0000225536 0.0000174358 0.0000285529 -0.0000078974 0.0000017608 -0.0000408371 0.0000064497 -0.0000028909 0.0001481581 -0.0000633194 0.0000857585 0.0000078644 -0.0001299594 -0.0000003677 -0.0000985970 0.0000316293 -0.0000757178 0.0000499522 -0.0001354289 -0.0002923536 -0.0000058079 -0.0000245017 0.0002879459 -0.0000798313 -0.0000662171 -0.0000976255 0.0000080950 0.0000751067 -0.0000382079 0.0000308508 0.0000994639 -0.0000389481 0.0000266466 -0.0000038481 0.0001637770 -0.0000263043 -0.0001733585 0.0000405456 0.0001043341 -0.0000015785 -0.0000804694 0.0000782472 0.0000364827 0.0345177158 0.0140175509 -0.0128272958 0.0065130972 -0.0001547716 -0.0046215489 -0.0122231736 -0.0087524880 -0.0059244532 0.0019163494 0.0002899935 -0.0006429771 -0.0069330718 0.0028564115 0.0100710458 0.0012696878 0.0008498670 0.0043738489 -0.0203329119 -0.0216361342 -0.0112863757 -0.0478027462 -0.0056459559 0.0209191474 0.0001623194 -0.0000329113 0.0001566853 -0.0119596291 0.0000693482 0.0098978127 -0.0576358037 0.0067709222 0.0522249164 0.0058860466 -0.0006627742 0.0054504687 -0.0081240608 0.0101439662 0.0077736145 -0.0040340693 0.0027001370 -0.0002801222 -0.0089370018 0.0001282277 -0.0118912792 0.0034470528 -0.0029407637 -0.0062642485 -0.0237486462 0.0314030258 0.0194929434 -0.0226234588 0.0134502844 -0.0011372229 0.0011632884 -0.0006158039 0.0001695298 -0.0114765506 0.0023210819 -0.0123967118 -0.0517463318 0.0061677707 -0.0462166700 0.0001329401 0.0000863009 0.0002058956 0.0002382959 0.0000026555 -0.0004225903 0.0005378288 0.0000078165 0.0014589704 0.0009021220 -0.0008767445 -0.0013064747 0.0196358687 0.0176028308 -0.0078759205 0.0340707876 -0.0188997340 -0.0223421982 -0.0380359468 -0.0087171733 0.0207958557 0.0337630873 0.0247789796 -0.0164082200 -0.3891053726 0.0758988015 0.2293447414 0.3067259530 0.3625462717 -0.1407523030 -0.0041914270 -0.0196630644 0.0006440234 0.0044923452 -0.0110500945 -0.0025917849 -0.0840917136 -0.0020562300 0.0579322077 0.0234310483 -0.1029299346 -0.0309386833 0.0382373446 0.0060020744 0.0219543614 0.0130515607 -0.0221345863 0.0066821495 0.0026793958 0.0199756369 0.0004506779 0.0063980498 0.0078553252 0.0019386940 -0.0660535117 0.0288618444 -0.0498523943 0.0428492010 0.0716226337 0.0270970915 -0.0324231576 0.0201654985 -0.0192828171 0.0230281558 -0.0328783066 0.0146004515 -0.3779733618 0.0545786869 -0.2161818586 0.1672612606 -0.4199704420 0.1212582050 0.0000236569 0.0000325733 -0.0000083878 0.0000738868 0.0000263293 0.0001150629 -0.0001282598 -0.0001174827 -0.0000776902 -0.0000348578 -0.0000894834 0.0000663259 -0.0000017521 0.0000009836 -0.0000475359 0.0003753246 0.0001838794 0.0000460494 -0.0001846908 0.0000124090 0.0000501255 -0.0000009324 -0.0000431697 0.0000397568 0.0005244169 0.0001291479 -0.0002195982 -0.0046832616 0.0022305417 0.0023778261 -0.0001916058 0.0011002210 0.0002457969 0.0003561127 -0.0011544838 -0.0000677932 0.0002615118 -0.0035456355 -0.0007976282 0.0006721541 0.0019806390 0.0003100336 0.0001201792 0.0010573714 -0.0001792698 -0.0005510647 -0.0004133075 -0.0002674155 0.0004384127 -0.0000175171 0.0002843172 -0.0048119268 0.0000353730 -0.0024528512 -0.0000830461 -0.0005429501 -0.0005369287 -0.0005643069 0.0007134309 0.0004462952 -0.0001108416 -0.0051241348 -0.0035059978 -0.0035602668 0.0069710582 0.0037521521 0.0028661758 0.0038406718 0.0032201061 -0.0010340458 -0.0083574668 0.0074910696 0.0329472483 0.0256405159 -0.0174557496 0.0027329421 0.0022918550 -0.0014336564 -0.0019266141 -0.0021510797 -0.0006363264 0.0004889038 -0.0000750175 -0.0010196530 -0.0009756990 0.0020292490 0.0050105138 -0.0002523458 -0.0019990227 -0.0029418486 -0.0004114520 -0.0005914255 0.0004597487 -0.0078712321 -0.0181615799 -0.0134884403 -0.0234026063 0.0165481069 0.0613780268 -0.0086538628 -0.0271350329 -0.0167798067 0.0005720045 -0.0011957873 -0.0016957756 0.0005413690 0.0032719052 0.0001601423 0.0104203546 -0.0175653074 0.0080624799 0.0037776098 0.0008302977 0.0002289702 -0.0481923706 -0.0345793415 0.0045880082 0.0042712221 0.0039842752 -0.0013489268 0.0083989946 0.0096792388 0.0085476392 0.0127941232 -0.0005284894 -0.0415743574 0.0170221732 0.0200034940 0.0293313343 0.0511138750 0.0074123557 -0.1039500000 0.1028896937 0.1021589303 0.1764085572 0.2058645082 0.0151910342 -0.4933173620 0.1972716348 0.2135775084 0.3476232063 -0.5464383449 -0.3442151516 0.0910221320 0.0005209509 0.0006889277 -0.0004424965 0.0002165973 -0.0050573027 0.0001954243 0.0015596912 -0.0011895723 0.0004576864 -0.0014428125 0.0032864387 -0.0017195058 -0.0009623930 -0.0002702394 0.0006197515 0.0000625140 -0.0000710230 -0.0002442571 -0.0000686613 0.0000554217 -0.0000468602 0.0000244622 -0.0000055005 0.0000080171 0.0008380280 -0.0006246383 0.0005260415 -0.0001366031 -0.0000034270 0.0000695290 0.0002911354 0.0005351284 -0.0009149827 0.0006352494 -0.0009081449 0.0014667062 0.0000262081 -0.0001975588 0.0000621237 -0.0002090732 -0.0000078280 0.0003090767 -0.0000472112 0.0000344550 0.0001135255 -0.0007897898 0.0025765772 -0.0050637043 -0.0061436430 0.0027421610 0.0014849539 0.0011699329 -0.0007103381 -0.0021122783 0.0003691076 -0.0001163987 0.0000113047 0.0001671205 0.0000383553 -0.0006423246 0.0004423026 0.0001193899 0.0001292376 0.0036633748 -0.0014337991 -0.0082000696 -0.0056704588 0.0041077879 0.0053900279 -0.0014014710 0.0020948588 -0.0028501287 0.0024595511 0.0009579881 -0.0007387256 -0.0003150299 0.0000040399 0.0004671487 -0.0003600268 -0.0002533509 -0.0003723179 0.0020000244 0.0005056013 -0.0005436053 -0.0009154608 0.0000119534 0.0007056939 0.0002907731 -0.0001849105 -0.0003014922 -0.0057645676 -0.0025695297 -0.0011020198 -0.0028355943 -0.0008689597 0.0024434316 -0.0005034079 -0.0002948658 -0.0000078920 -0.0051982258 -0.0034060383 -0.0000866234 -0.0028116370 0.0008628799 0.0015203864 0.0002103894 0.0000146021 0.0003110063 -0.0004296395 0.0005336957 0.0004553418 -0.0000803701 0.0000551241 -0.0000315888 -0.0004077006 -0.0000556944 -0.0006055259 0.0001230320 -0.0001100990 -0.0002868557 -0.0022237039 0.0026333541 0.0014082046 -0.0004530249 0.0006435712 0.0004600411 -0.0000020148 0.0000025699 0.0000101452 0.0001037045 -0.0002721611 -0.0009293160 -0.0034368911 0.0005237310 -0.0028614040 -0.0000608842 -0.0000617444 0.0002055458 -0.0000933367 0.0002076730 0.0000209463 0.0000378074 0.0000055800 0.0001479979 0.0000516874 -0.0000624192 -0.0001229079 -0.0011964072 0.0002309717 0.0006886022 0.0001268022 0.0007278863 -0.0000320806 -0.0000364496 -0.0005102487 -0.0000147563 0.0000115249 -0.0000457034 -0.0000007989 0.0019637920 -0.0010444298 -0.0013330230 0.0002139414 0.0002524237 -0.0001702368 0.0006304825 -0.0010151300 -0.0004059772 -0.0005831679 0.0005991035 0.0003561223 0.0056383408 -0.0023686066 -0.0046801612 -0.0026198096 0.0091283211 0.0027397815 0.0004155633 -0.0002828061 0.0003116777 -0.0004195637 -0.0001768792 -0.0002565511 0.0004750667 0.0006358846 0.0002078901 -0.0002453932 -0.0000684052 -0.0001180009 0.0020081263 0.0005531149 0.0016619964 -0.0018801235 -0.0026855251 -0.0010794549 -0.0003944042 0.0005063633 -0.0002422403 0.0003390794 -0.0004306694 0.0002135803 -0.0041627413 0.0008967182 -0.0024523937 0.0024160433 -0.0059740383 0.0017114108 0.0004090855 -0.0016872117 0.0006672150 -0.0033271326 0.0018786727 -0.0027859287 0.0032272608 0.0050363547 0.0057657032 -0.0011433144 0.0015247248 -0.0052576698 0.0015848237 -0.0011679819 0.0008089324 -0.0151447126 -0.0050472725 0.0004915337 -0.0009708746 0.0027914193 -0.0000879264 0.0049164565 0.0040295067 -0.0024145760 0.0002351506 0.0158797763 0.0012398229 0.0618841183 -0.0090432098 -0.0379000914 0.0067451551 0.0001324364 -0.0025192735 0.0337377963 -0.0246594352 -0.0135874048 -0.0032435466 -0.0340969530 -0.0044346369 -0.0101602925 -0.0162521474 -0.0064295771 -0.0318178008 0.0014107464 -0.0116306023 -0.0088202019 -0.0000110647 -0.0031887087 0.0067915943 0.0140440928 0.0032373789 -0.0825107614 0.0114806606 -0.0495698149 0.0153498243 0.0055580529 0.0066523189 -0.0154636291 0.0143897801 0.0071060976 -0.0003761835 -0.0002949919 -0.0006296739 0.0006702015 -0.0013473427 0.0009209767 0.0000373536 0.0000456771 0.0017888647 -0.0007044750 0.0018425706 -0.0013343888 0.0026715212 0.0020780015 -0.0012179692 0.0001738758 0.0002347905 0.0000453754 -0.0002362310 0.0000216581 0.0004811507 0.0000890759 0.0000402283 -0.0001900649 -0.0001282176 -0.0000321563 0.0002467957 0.0000492988 -0.0000023652 -0.0002288795 -0.0001622120 -0.0003411457 0.0000022658 -0.0004435105 -0.0016471733 -0.0011458520 -0.0016255976 0.0009383761 0.0038440439 0.0000532863 -0.0023162604 -0.0008608497 -0.0000161512 -0.0002022302 -0.0001159233 0.0002597305 -0.0000430673 0.0001546955 -0.0003332316 0.0018789514 -0.0014283552 -0.0002437215 -0.0001141928 -0.0001267815 0.0006246918 0.0004684995 -0.0001972652 -0.0001002849 0.0000574397 0.0007143220 0.0000343057 -0.0001076610 -0.0001216899 0.0001702571 0.0001508102 0.0004522657 -0.0003791232 -0.0004857944 -0.0008492217 -0.0027750079 -0.0000606420 0.0065169275 -0.0000615089 0.0009069058 0.0002551519 -0.0018764862 0.0004535544 0.0044460146 -0.0051034102 -0.0057037047 -0.0093237272 0.0072786071 0.0043652094 -0.0012837886 0.0001702441 0.0002367057 -0.0002080802 -0.0005675268 -0.0016673556 0.0007242102 -0.0083172505 0.0036289244 0.0007385644 0.0001049203 -0.0000273256 0.0001442781 0.0000031301 0.0000642848 0.0000647152 -0.0000133078 -0.0000606381 -0.0000388761 -0.0000042326 -0.0000164962 -0.0000332473 0.0000085344 0.0000265664 -0.0000138488 -0.0001753413 0.0000611822 -0.0000282052 0.0000264511 0.0000109383 0.0000191837 0.0000316840 -0.0000325953 0.0000786390 -0.0000980524 0.0000839384 -0.0001421501 0.0000515182 -0.0001477997 0.0001280139 -0.0000138448 0.0000213262 -0.0000348770 -0.0000400461 -0.0000598722 0.0001494335 0.0000558904 -0.0001702947 0.0003645717 0.0009685742 -0.0001131075 -0.0000502852 0.0003486685 -0.0000856467 0.0002724555 -0.0000939659 0.0000329709 0.0000446366 0.0000780292 -0.0000690830 -0.0001150818 -0.0000809262 0.0000402543 0.0000340020 -0.0002286674 0.0001854297 0.0008084349 0.0006370449 -0.0003924885 -0.0006134898 0.0001110099 -0.0002117627 0.0003442082 0.0254843995 0.0074172036 -0.0053381477 0.0030669794 -0.0004664366 -0.0040922789 -0.0085515587 -0.0059996213 -0.0038215891 -0.0025531055 -0.0005916597 0.0008546041 -0.0066176332 0.0012252681 0.0078262274 0.0040136106 0.0029172693 0.0004626805 -0.0274952417 -0.0182822399 -0.0131232369 -0.0224933034 -0.0057005590 0.0067858816 0.0007619038 0.0001968704 -0.0002069840 -0.0254891904 -0.0092058050 0.0038238064 -0.0100675495 0.0008054049 0.0166154770 -0.0005017344 -0.0000551699 -0.0020471775 0.0021222798 -0.0024593421 -0.0016778298 0.0018862096 -0.0009533264 0.0007053400 0.0027035220 -0.0008614151 0.0025925542 -0.0016178747 0.0022985670 -0.0006816471 0.0111483997 -0.0112166027 -0.0075363550 0.0038748310 -0.0038439220 0.0000298752 -0.0003823709 0.0002572599 -0.0001118925 0.0104762208 -0.0078618790 -0.0003725447 -0.0071045487 -0.0001277197 -0.0007358032 0.0004027636 0.0000003335 -0.0009688379 0.0006656776 0.0002312844 0.0006243223 -0.0003230511 0.0000187905 -0.0006721943 -0.0002482832 0.0002571987 0.0004815444 -0.0405802533 0.0078109905 0.0225818100 0.0063365046 0.0317472716 -0.0007679297 0.0086614777 -0.0211410861 -0.0067698823 -0.0186473983 -0.0131121488 0.0098406893 0.2346863026 -0.0785501483 -0.1451673764 -0.1491482856 -0.1735936208 0.0668757155 0.0270854569 -0.0369011979 -0.0153647720 -0.0280462238 0.0343313201 0.0175363420 0.2731601713 -0.1022024241 -0.2152982814 -0.1400786985 0.5015474097 0.1448743339 0.0119471739 0.0287321018 0.0057091129 0.0342922012 -0.0057969011 0.0177161533 -0.0269547416 -0.0168240642 -0.0103572020 0.0275600294 0.0180071980 0.0126792549 -0.2144941368 -0.0008368255 -0.1612980444 0.2176594435 0.3204707686 0.1155560844 -0.0187535040 -0.0115235772 -0.0093926287 0.0146869105 -0.0193506139 0.0097600504 -0.2652368188 0.0107621566 -0.1532637387 0.0942385605 -0.2311696975 0.0662198926 -0.0000144918 0.0000114735 -0.0000667020 0.0000275043 -0.0000447080 -0.0000183063 -0.0002167091 -0.0002873458 -0.0002740774 -0.0000650875 -0.0001082807 -0.0000050685 -0.0000732591 -0.0000223284 -0.0000405931 0.0003635401 -0.0000147512 -0.0001379490 -0.0001925132 -0.0001567977 0.0001229800 0.0000077264 -0.0000077672 0.0000936063 0.0000085456 0.0000132340 -0.0000006176 0.0000087940 -0.0000449035 -0.0000122255 0.0000228566 -0.0000430077 -0.0000230239 0.0000026495 0.0000897942 0.0000082580 0.0000556869 0.0000944642 -0.0000143495 -0.0000122689 -0.0001936481 -0.0000058517 -0.0001182074 -0.0000991104 -0.0000387705 0.0000196215 0.0000361060 0.0000193880 0.0000090499 0.0000277328 -0.0000082753 -0.0000322915 0.0000583711 -0.0000709068 -0.0000089034 0.0000157193 0.0000465018 -0.0000529519 0.0000290912 -0.0000235401 0.0002910639 0.0000781067 0.0000884194 -0.0001583795 0.0001764925 0.0001151991 -0.0003614589 -0.0003875964 -0.0003132221 0.0012180905 -0.0000683635 -0.0009501030 0.0036843137 0.0030229656 -0.0018348390 0.0002548921 0.0003140336 0.0000197616 -0.0003774810 -0.0003998603 0.0000362998 0.0001877747 0.0001233573 -0.0002047771 -0.0000453973 0.0003348249 0.0006790958 -0.0000040098 -0.0003376541 -0.0006783088 -0.0002050496 -0.0002032388 0.0001485043 -0.0008531265 -0.0022653682 -0.0018109333 -0.0036075158 0.0026551146 0.0095335895 -0.0013320165 -0.0050257958 -0.0030916756 0.0010037438 -0.0000264450 -0.0004522068 -0.0004806296 -0.0007732977 0.0004714214 -0.0021838546 0.0024248495 -0.0008489003 -0.0010376965 -0.0002219457 0.0003479652 0.0002763055 0.0001905245 -0.0003162737 0.0007806100 -0.0002949650 0.0000675420 0.0001812395 0.0005257228 0.0010686868 0.0001230589 -0.0001273337 -0.0004109516 0.0000087652 -0.0004106547 -0.0004260309 -0.0021213641 -0.0000780165 0.0054516274 0.0005575233 0.0002345219 0.0013741270 -0.0023528791 0.0000213238 0.0046898049 -0.0069403973 -0.0043842675 -0.0103979838 0.0114266679 0.0071531011 -0.0022259502 0.0001664398 0.0001241513 -0.0000259131 -0.0003364817 0.0007430862 -0.0000914033 -0.0001564255 0.0001132654 -0.0000386617 -0.0008094871 0.0009323184 0.0028481753 -0.0036265075 -0.0016914155 0.0044379250 0.0003914941 0.0030034824 -0.0021699277 -0.0000955771 -0.0003575905 -0.0002101927 -0.0000036026 -0.0001670099 0.0001691453 -0.0001225536 0.0000477160 0.0001313423 0.0000319929 0.0006493842 -0.0001930362 -0.0242383243 0.0406172468 -0.0401933818 0.0582699596 -0.0904863935 0.0855356155 -0.0001188890 0.0001285024 -0.0001268771 -0.0002483248 -0.0001460777 -0.0003013573 0.0000350043 0.0005643597 -0.0004750996 -0.0002777554 -0.0000427131 -0.0000190525 0.0006393270 -0.0001954954 0.0000668369 0.0003578902 -0.0000990230 -0.0000801562 0.0058184059 -0.0017148891 0.0039348869 -0.0002594761 -0.0049285086 0.0006444743 -0.0054391281 0.0013105669 0.0002021913 0.2541078939 -0.1352097130 -0.6142765358 -0.3776615849 0.3528455131 0.3871795760 -0.1597025947 0.2100170664 -0.1713933955 -0.0001161885 -0.0000483604 0.0000501862 -0.0000038707 0.0000047199 -0.0000104933 0.0000046537 0.0000239509 -0.0000060107 -0.0000191262 -0.0000055756 0.0000191581 0.0000451493 0.0000131957 -0.0000322045 -0.0000177353 -0.0000122945 -0.0000117101 0.0002762996 0.0001130531 0.0000810600 0.0001677400 -0.0002445248 0.0000983582 -0.0000039371 -0.0000123624 -0.0000261825 0.0003243605 0.0000360980 0.0000850854 -0.0000164504 -0.0000234324 -0.0000103730 -0.0000175672 0.0000126199 0.0000106991 0.0000425386 -0.0000374614 -0.0000105631 -0.0000816670 0.0000474728 -0.0000145277 0.0000341637 -0.0000220503 0.0000273687 -0.0000036771 -0.0000033630 -0.0000135745 0.0001335450 -0.0001049931 -0.0000614943 0.0003934291 -0.0001173942 0.0002524594 0.0000065879 0.0000157753 0.0000233989 0.0003579420 -0.0002163623 -0.0001238254 0.0001126015 -0.0000659347 0.0001114350 0.0000023262 0.0000109283 0.0000183357 0.0000031677 0.0000156646 -0.0000071493 0.0000032415 0.0000035053 0.0000342177 0.0000114339 -0.0000283196 -0.0000446127 0.0000522098 -0.0000333597 -0.0000325579 -0.0000385824 0.0000199590 0.0000218897 0.0000355715 0.0000235090 -0.0000199699 -0.0000328507 -0.0000076665 0.0000167299 0.0002107229 -0.0000152499 -0.0001422687 -0.0003269803 -0.0003510763 0.0001199165 -0.0000259393 0.0000482113 0.0000218223 0.0000219402 -0.0000152898 -0.0000139339 -0.0001227724 0.0000779159 0.0001132676 0.0000611795 -0.0002376113 -0.0001016781 -0.0000220520 0.0000876752 -0.0000238195 0.0001539185 -0.0000037277 0.0000788795 -0.0001363343 -0.0000985492 -0.0000538525 0.0001156057 0.0000507457 0.0000536500 -0.0007398591 -0.0000518554 -0.0006862054 0.0008428934 0.0011911495 0.0004329600 -0.0000196893 -0.0000685325 -0.0000049908 0.0000121326 -0.0000267810 0.0000088195 -0.0004516028 -0.0000338881 -0.0002830819 0.0000682878 -0.0001353789 0.0000132057 0.0003068244 -0.0000583863 -0.0020566093 -0.0008863819 0.0026717427 0.0017979276 -0.0040199423 -0.0023255509 -0.0021675295 -0.0015496436 -0.0023873828 -0.0016399935 0.0017522116 -0.0018389382 -0.0010160701 -0.0042273207 0.0021812695 0.0040843402 -0.0062027590 0.0027048335 0.0009435947 0.0075160027 0.0046672010 -0.0020132071 0.0055522433 0.0027613345 -0.0043437467 -0.0423179439 0.0220198212 0.0177398782 -0.0029774710 0.0106635666 0.0033480648 0.0138327122 -0.0507274990 -0.0124363705 -0.0290163062 -0.0554401342 0.0065078201 -0.0072089380 0.0712674503 -0.0022975736 0.0419072497 0.0460640766 0.0167114265 -0.0049990933 -0.0087548366 -0.0037023395 0.0028028241 -0.0094199681 0.0040795608 -0.0268615281 -0.0103572380 -0.0030518031 -0.0208397491 -0.0131446803 -0.0050949731 -0.0103973952 0.0149860327 0.0021224582 -0.0024370853 -0.0005172508 -0.0006540335 0.0035924722 -0.0050105599 -0.0033910048 0.0054223952 0.0061578330 0.0048708147 0.0011773324 -0.0010063646 -0.0003496867 0.0020309076 0.0017290865 -0.0011489548 0.0002897824 0.0002339388 -0.0001122065 -0.0000658456 -0.0001489774 0.0002303815 -0.0000322688 -0.0001496999 -0.0001948312 0.0000114868 -0.0000000447 0.0000997585 -0.0000617811 0.0001723966 0.0000126259 -0.0001635684 0.0000401489 0.0001582402 -0.0010807120 -0.0023813449 -0.0017352140 -0.0006999774 0.0004836589 0.0008456333 0.0020350398 -0.0003825321 0.0015343334 0.0000213440 -0.0003366388 -0.0003043231 -0.0003432904 0.0001867090 0.0000461548 -0.0017157148 0.0009773290 0.0025961540 -0.0002793676 -0.0002172852 -0.0002524434 0.0012598675 0.0008545626 -0.0007884157 -0.0005749764 0.0000509124 0.0021161362 0.0002307084 0.0000347726 0.0005297750 0.0003926686 0.0003360406 0.0004062310 -0.0010450919 -0.0013286512 -0.0022348872 -0.0084182081 -0.0005894809 0.0195811118 0.0030026256 0.0059247787 0.0068895903 0.0002023004 0.0004629280 0.0006956077 -0.0123957982 -0.0139611207 -0.0226602632 0.0141560163 0.0081448460 -0.0028145885 -0.0002502654 -0.0002467371 -0.0004441295 0.0025279342 0.0011377133 -0.0006908080 0.0586678234 -0.0426824910 0.0172261241 0.0001551532 -0.0003417870 -0.0003823703 0.0005059631 0.0001066276 -0.0002767912 0.0000106294 0.0001215948 0.0001283657 -0.0000891624 -0.0000067301 -0.0000014088 0.0000542995 0.0000041926 -0.0000834185 -0.0003612504 0.0001650949 -0.0000009660 0.0000407273 0.0000274348 0.0001104702 -0.0003969180 0.0001509154 0.0002425859 0.0000379699 -0.0005054028 -0.0001352272 0.0000661726 0.0002224921 -0.0001485551 0.0000896566 -0.0000366566 0.0005184095 -0.0001481668 -0.0003695937 0.0005349468 0.0004550065 0.0003753495 0.0003605929 0.0014443590 -0.0004281188 -0.0001336906 0.0015916363 -0.0004822602 0.0000493267 0.0001816263 0.0000723759 -0.0002892834 0.0002999410 -0.0002899912 -0.0005177819 0.0000643530 -0.0003557810 -0.0001345765 0.0012510509 -0.0002606996 -0.0011583528 -0.0001969244 0.0011737912 0.0002345041 -0.0012229405 0.0011099507 0.0009717862 0.0595711327 0.0213507742 -0.0197535260 0.0093221522 0.0000715732 -0.0068662163 -0.0196551386 -0.0141009453 -0.0096211809 -0.0007108899 -0.0005008561 -0.0001633817 -0.0133143591 0.0042719645 0.0183149764 0.0062151175 0.0040266046 0.0043132682 -0.0554381772 -0.0401010088 -0.0252231419 -0.0612427920 -0.0117563425 0.0218327779 0.0009514765 0.0002086262 -0.0001795688 -0.0420291583 -0.0114995792 0.0129047118 -0.0663194270 0.0075809298 0.0682558744 0.0091341631 -0.0019425767 0.0083991831 -0.0154739051 0.0188686465 0.0143510391 -0.0048471516 0.0031225231 -0.0006028862 -0.0174304399 0.0014119505 -0.0221835722 0.0080605144 -0.0074535064 -0.0061385857 -0.0613552616 0.0675962830 0.0414844736 -0.0441841050 0.0282652692 -0.0062812328 0.0016539778 -0.0009207771 0.0003401342 -0.0434313692 0.0245555120 -0.0138405019 -0.0699097611 0.0123674906 -0.0700380530 0.0004715564 0.0000931800 -0.0004807553 0.0008327869 0.0002148067 0.0000981721 0.0009148060 -0.0001943369 0.0015530155 0.0011782036 -0.0010252328 -0.0012125587 -0.0320209804 0.0090820395 0.0190234805 0.0269409258 0.0082295418 -0.0153055618 -0.0125249409 -0.0152413814 0.0057322196 0.0007374697 0.0003048801 0.0000089668 0.0008393414 -0.0206530948 -0.0048158358 0.0284735282 0.0354594486 -0.0137298317 0.0278490811 -0.0437715185 -0.0203160371 -0.0292957313 0.0255768909 0.0183195197 0.2385245125 -0.1008426150 -0.1924415788 -0.1290311836 0.4350089561 0.1286534439 0.0202108029 -0.0301228235 0.0155709120 -0.0480890501 0.0014630198 -0.0265931254 0.0535079427 0.0413408075 0.0239220029 -0.0470030818 -0.0192349352 -0.0232089470 0.3221918032 0.0204598567 0.2537474083 -0.3419921128 -0.4857495138 -0.1815756261 -0.0011948370 0.0250884156 -0.0025110600 -0.0037193959 0.0043714146 -0.0028244887 0.0935464063 0.0187366303 0.0555241866 -0.0060060383 0.0084348372 -0.0026154245 -0.0000469125 0.0001334345 0.0001315848 0.0001908346 -0.0001936153 0.0001152230 0.0003398648 0.0001971397 0.0000040083 0.0004915366 0.0003604630 0.0005945113 -0.0003086343 0.0001668222 0.0000487217 0.0001150889 -0.0001712009 -0.0003606126 0.0012054594 -0.0008818456 -0.0002037211 0.0000150792 -0.0000290400 0.0009496767 -0.0001656772 0.0006011742 0.0001156172 0.0059018470 -0.0030002796 -0.0032464772 0.0001320449 -0.0016225593 -0.0002748620 0.0001523050 -0.0020174646 -0.0003977715 -0.0030138905 0.0033501760 0.0021623148 -0.0018908022 0.0006742877 -0.0007741775 0.0008335916 0.0013135991 0.0005878594 -0.0000447311 0.0000274114 -0.0000710030 -0.0001705123 -0.0001286360 0.0000128961 0.0024464151 -0.0003396369 0.0017610828 0.0001318291 0.0004657196 0.0005254486 0.0012312399 -0.0011606095 -0.0005756840 -0.0017135199 0.0105930089 0.0069513841 0.0084392733 -0.0157492666 -0.0092372523 -0.0042988711 -0.0059694074 -0.0047648083 0.0101816480 -0.0085452947 -0.0189270644 -0.0026797495 -0.0028813594 -0.0001659976 0.0000248431 -0.0008809898 -0.0013768439 0.0015118893 0.0005966125 0.0000983146 -0.0006660426 -0.0008480984 0.0000822244 -0.0003562488 -0.0013009510 -0.0017209904 0.0001792150 0.0020821389 0.0036797980 0.0011506840 0.0021067795 -0.0001539698 -0.0011562326 -0.0015874879 -0.0005884099 0.0107142468 -0.0086996267 -0.0286871519 0.0027835651 0.0221752376 0.0117100588 -0.0032463436 0.0009015424 0.0016694180 -0.0048335305 -0.0034800003 -0.0024965358 0.0221492835 -0.0313259067 -0.0368049544 -0.0009746980 0.0037804435 0.0167856722 -0.0058782570 -0.0011570048 0.0153781602 0.0225025317 0.0049607102 -0.0521057516 -0.0167121289 -0.0221413825 -0.0287651836 -0.0193980631 -0.0055671301 0.0275063467 0.0226852303 0.0251575491 0.0351760197 0.2253948814 0.0210321682 -0.4992092049 -0.2194675003 -0.2228193988 -0.3877066307 -0.1601338554 -0.0252150655 0.3697705879 0.2225149409 0.2475534357 0.3946796394 -0.0457463563 -0.0230765558 0.0215244555 -0.0014428042 -0.0019151865 0.0005880386 0.0046157136 0.0114997062 -0.0028916654 0.0009878127 -0.0007097852 0.0003970203 -0.0044670966 0.0016046927 0.0024495748 -0.0044005377 0.0001899806 0.0038278616 0.0004647801 -0.0005193825 -0.0010797087 -0.0002598936 -0.0002687606 -0.0002877011 0.0001645933 0.0000457826 0.0003683511 -0.0006534124 0.0012467095 -0.0004188107 0.0003343352 0.0001430096 0.0001314707 0.0031842118 -0.0014237684 -0.0044205916 0.0016109280 0.0038871269 0.0043933557 -0.0004423608 0.0005841975 -0.0005228986 0.0002530946 0.0001693991 -0.0024335907 0.0002336319 -0.0002853882 0.0003032205 0.0007708531 -0.0056874762 0.0087236273 0.0099949587 -0.0069342696 -0.0028627420 -0.0038126027 0.0021521693 0.0013748164 -0.0011702875 0.0003947462 0.0004696507 0.0005120447 -0.0004558457 -0.0003880590 -0.0007581388 -0.0001221144 -0.0000769567 -0.0094467738 -0.0012140315 -0.0064164772 -0.0119264786 -0.0057355186 0.0107721998 0.0112206733 -0.0079989061 -0.0171639263 -0.0005405138 -0.0002112974 0.0001719324 0.0002679794 -0.0000082958 -0.0002468709 0.0000230901 -0.0000250162 0.0001963892 -0.0012894739 -0.0002725019 0.0005905747 -0.0002911282 -0.0002711071 0.0000517327 0.0003949745 0.0004078536 -0.0002023848 0.0049612444 0.0025599596 0.0009236088 -0.0009035616 0.0011766119 -0.0001344266 0.0004610866 0.0003192706 0.0007949520 -0.0032606719 -0.0007737331 -0.0012086693 0.0054879927 -0.0016040644 -0.0027112736 0.0014183008 -0.0008655574 0.0003292780 -0.0011035914 0.0008163676 -0.0001772549 -0.0025183378 0.0015080666 -0.0004259590 -0.0010129168 0.0006930781 -0.0004551113 0.0011853447 -0.0009051982 0.0001870625 0.0089104092 -0.0081719743 -0.0025921425 -0.0071010781 0.0025081780 -0.0048239497 0.0004502149 -0.0002713975 0.0001385425 -0.0064356055 0.0047904035 0.0018124295 0.0092350748 -0.0031884869 0.0063071942 0.0000663818 -0.0000013403 -0.0010599347 -0.0000759705 -0.0000953255 0.0002472164 0.0002156845 0.0000156852 0.0004689166 0.0003017388 -0.0002807935 -0.0004326609 0.0000215487 0.0000041430 0.0000034596 0.0019423282 -0.0006486564 -0.0011888770 -0.0008865471 -0.0001864386 0.0004849039 -0.0002300498 0.0001546800 0.0001684210 -0.0027573181 0.0002009634 0.0015148116 -0.0005071052 -0.0001495862 0.0002839610 0.0013337548 -0.0016883832 -0.0008865611 -0.0014270936 0.0010983176 0.0008929498 0.0114516405 -0.0044120132 -0.0089748123 -0.0065771293 0.0219409201 0.0063365286 0.0010724804 -0.0000090855 0.0006630972 -0.0009794344 0.0000797640 -0.0005342059 0.0013927918 0.0007429471 0.0007059281 -0.0011743213 -0.0002165559 -0.0006216524 0.0065824836 0.0003584611 0.0052134933 -0.0074307008 -0.0100168307 -0.0038700568 -0.0003494278 0.0003544373 -0.0002337447 0.0000537897 -0.0000388664 0.0000253496 -0.0007298744 0.0004733653 -0.0002888865 0.0011105180 -0.0029154168 0.0008309261 0.0025134090 -0.0007886266 -0.0010613029 -0.0004930601 0.0064004638 0.0052092599 -0.0048082501 0.0005805907 0.0041009042 -0.0055607316 -0.0048014941 -0.0069269661 0.0012483405 -0.0019926098 -0.0018604526 0.0111484128 0.0136364455 0.0109959077 -0.0059492533 0.0054572125 -0.0020041610 0.0051072281 0.0028712661 -0.0036156857 -0.0002589023 0.0015400651 0.0004272119 0.0132959588 -0.0044318676 -0.0076754073 0.0002435119 -0.0015549674 -0.0002944267 0.0004863435 0.0008722762 -0.0000986093 0.0010408758 0.0036267159 -0.0000351336 0.0011969678 -0.0019166636 0.0015957060 -0.0005672574 -0.0055386086 -0.0002171888 0.0001668229 -0.0008238847 0.0003611813 -0.0004187587 0.0056547385 -0.0022698644 -0.0167676700 0.0020748791 -0.0210086161 0.0007567246 0.0000160504 -0.0008330166 0.0008861626 -0.0009701808 -0.0002395842 -0.0025146171 -0.0009450025 -0.0002668502 0.0011912545 -0.0013299530 -0.0008548509 0.0024611700 0.0025687944 0.0021528040 0.0000045737 0.0019497021 -0.0016655433 0.0011659732 0.0011041753 -0.0004175376 -0.0000513662 0.0000955819 0.0002147534 -0.0000899096 -0.0003849076 -0.0004934191 -0.0001247422 0.0001191149 0.0004262707 0.0000542830 0.0001126042 0.0001060110 0.0000830346 -0.0000396699 -0.0001382395 -0.0002990983 -0.0009473479 -0.0006181058 0.0006388536 0.0024471161 0.0018360481 -0.0007571837 0.0006740219 0.0021341007 -0.0004389574 -0.0006279653 -0.0007404285 0.0003846231 0.0000469790 0.0001598773 -0.0007518986 -0.0003611069 0.0001272455 0.0002474105 0.0003295016 -0.0043910425 -0.0004291189 0.0001166078 0.0014078879 -0.0000707441 0.0000489920 0.0005032210 0.0008548907 0.0003013144 -0.0013787583 -0.0003825149 -0.0006009599 -0.0007953871 -0.0005634622 -0.0002486764 0.0006957009 0.0007911948 0.0007333897 0.0006458320 0.0072663951 0.0009554968 -0.0155759644 -0.0064920537 -0.0063263139 -0.0113963340 -0.0053671863 -0.0004051770 0.0114335412 0.0051152022 0.0056057021 0.0084108978 0.0002308185 0.0004222249 0.0003886141 0.0004565076 0.0003457356 -0.0001907451 -0.0044872861 -0.0002015243 0.0011341772 0.0000539454 -0.0017190483 0.0009707516 -0.0001012169 0.0008623362 0.0010737177 -0.0007306612 0.0002454019 0.0009223534 0.0000442847 -0.0002856821 -0.0004841256 -0.0002785037 -0.0002935742 0.0001696374 0.0000275587 0.0002640259 -0.0002951542 0.0015633933 0.0006575168 0.0007961194 0.0000288123 0.0002183965 -0.0000843419 0.0005022641 -0.0003212242 -0.0007029039 0.0002400033 0.0007545658 0.0006310821 0.0014064743 0.0014076576 0.0009927541 0.0021658087 0.0001457701 -0.0017304180 -0.0008485461 -0.0012381249 0.0024072641 -0.0030429478 -0.0027526333 -0.0023009418 -0.0073686223 -0.0071872637 -0.0020098327 -0.0045564565 0.0024868253 -0.0057021362 -0.0000618559 0.0001585147 0.0000826254 -0.0000299403 -0.0005238558 0.0000767855 0.0004264381 -0.0009365368 -0.0007133577 -0.0021994083 -0.0000483983 0.0002811049 -0.0016699854 -0.0010370381 0.0015023566 0.0020394975 -0.0015182483 -0.0030485031 -0.0027377950 -0.0011670102 0.0011101767 0.0018012004 0.0005323750 -0.0006065797 -0.0008798433 0.0001160037 0.0012995504 -0.0049097724 -0.0011956729 0.0014014767 -0.0010447370 -0.0009454629 -0.0005555505 0.0020776548 0.0006940473 -0.0009415927 0.0235970887 0.0133764439 0.0045262181 -0.0074985896 0.0011213312 0.0061096208 0.0006910065 0.0001701556 -0.0001737488 -0.0099745721 -0.0056169684 -0.0029327713 0.0218943030 0.0001180002 -0.0175398881 -0.0588646460 0.0363245788 -0.0164468085 0.0411288434 -0.0273424421 0.0145994028 0.1273896229 -0.0751038646 0.0262691404 0.0394051979 -0.0305948036 0.0076626011 -0.0551374794 0.0407092672 -0.0124558852 -0.4526854345 0.4077891291 0.1413415352 0.2528958912 -0.0828833997 0.1730764579 -0.0153996551 0.0086744445 -0.0041323461 0.2274332559 -0.1891473759 -0.0684576254 -0.4739736432 0.1660149045 -0.3401980840 0.0003056844 -0.0000663257 -0.0012606004 0.0007393606 0.0002993827 0.0009839733 -0.0135893520 -0.0011392728 -0.0384973943 -0.0173843681 0.0189366515 0.0330188840 -0.0010641122 0.0013760836 0.0007086321 -0.0023308268 0.0012086271 0.0014675520 0.0006308206 -0.0011265985 -0.0004645926 -0.0000727475 -0.0002617395 0.0000275064 0.0047016915 -0.0022947788 -0.0031068099 0.0023950326 0.0026960867 -0.0011389043 -0.0002755290 0.0006743269 0.0002171909 0.0010285734 -0.0002361651 -0.0006139525 -0.0040494498 0.0017558297 0.0039291920 0.0040023945 -0.0121373696 -0.0037573639 0.0015070826 -0.0023468238 0.0009756725 0.0067779461 -0.0014122898 0.0036470496 -0.0036802076 0.0004345568 -0.0020173853 0.0010942335 0.0006442666 0.0004744827 -0.0148595552 0.0014697760 -0.0110836604 0.0026280079 0.0036138724 0.0020430525 0.0010368768 -0.0017127256 0.0007885429 -0.0022099322 0.0003994069 -0.0012782405 0.0128391515 -0.0032657499 0.0066538757 -0.0145310422 0.0330336443 -0.0100992924 0.0001893859 -0.0003480131 -0.0004810309 -0.0004845252 0.0005029132 -0.0004443853 -0.0011952094 -0.0002951203 0.0002391476 -0.0013859188 -0.0012636951 -0.0015550845 0.0003839039 -0.0002769342 -0.0006231781 -0.0005504162 0.0017139655 0.0014688239 -0.0027295210 0.0001739094 0.0008886076 0.0005409859 -0.0009363298 0.0008965088 -0.0018376123 -0.0065253704 0.0012503878 -0.0452990619 0.0081017402 0.0392350214 0.0006030224 -0.0007212327 -0.0006713514 0.0000443103 0.0059518185 0.0008141367 0.0014401925 0.0018449948 -0.0013106359 0.0001302981 -0.0039837482 0.0000635267 0.0003964858 -0.0012554465 -0.0000013995 0.0007303357 0.0014167443 0.0003779062 -0.0007768071 -0.0010824953 -0.0006445237 0.0138008582 -0.0000621384 0.0063674101 0.0011115165 0.0005818961 0.0003275198 0.0012136530 0.0002056807 0.0001886679 -0.0025916648 -0.0002500618 -0.0012259020 0.0012286002 -0.0014967017 -0.0008669478 0.0027866164 0.0027499420 0.0028036977 0.0013946449 -0.0042650524 0.0007360026 -0.0038525826 -0.0031396094 0.0023685586 -0.0002425789 0.0000035098 0.0002082635 -0.0002023543 0.0005388358 0.0005578764 0.0002190291 0.0000601007 -0.0004301541 0.0000349644 0.0004698858 -0.0003040270 0.0004199599 -0.0006211905 -0.0004749796 0.0003096086 0.0013328870 0.0010310585 -0.0009479090 -0.0029883402 -0.0023711244 0.0016482020 -0.0008324951 0.0013429659 -0.0050715678 0.0030171751 -0.0039759223 0.0004169371 -0.0003443829 -0.0009063756 -0.0005875236 -0.0005242192 0.0000859279 -0.0001054652 0.0009168995 -0.0039326670 -0.0004716652 0.0003614573 0.0010169261 0.0005380633 0.0004177007 0.0000310715 0.0004823967 -0.0005076998 -0.0004463855 -0.0004612730 -0.0001998866 -0.0002092274 -0.0009459513 -0.0000133269 0.0004906938 0.0002380152 0.0000502586 -0.0000401068 0.0026823157 0.0028916931 -0.0105884957 -0.0012753427 -0.0024979327 -0.0027202704 -0.0008694627 -0.0033154900 0.0066635793 0.0018257508 0.0027068155 0.0032435283 0.0050540524 0.0026933705 -0.0005852508 -0.0005835323 -0.0008212836 -0.0000612923 0.0023517859 0.0034439629 -0.0021209848 -0.0021744370 0.0017648917 -0.0010404754 -0.0002540747 0.0010174484 0.0005500848 -0.0009204887 0.0002035480 0.0009794661 0.0000520690 -0.0002493138 -0.0003798988 -0.0000684995 -0.0001428488 -0.0000051031 0.0000207485 0.0000624787 0.0000464683 -0.0000199961 0.0001525714 0.0000338585 0.0000680622 0.0000936808 -0.0000013173 0.0005157585 -0.0002633623 -0.0006380939 0.0002050679 0.0007004253 0.0005624823 0.0000253240 0.0003562071 -0.0000906237 0.0002491546 0.0000918288 -0.0008006263 -0.0000341917 -0.0002209809 0.0002782761 0.0000137662 0.0000053733 0.0000934410 -0.0000248706 -0.0006643904 -0.0002190234 0.0005802995 -0.0000290261 -0.0001423333 -0.0003417135 0.0001218095 0.0002353977 0.0000431089 -0.0001611517 0.0000330107 -0.0000382360 -0.0001808568 -0.0001543646 -0.0018140689 -0.0000009849 0.0001415812 -0.0011586820 -0.0010751829 0.0010982547 0.0019403792 -0.0014749439 -0.0028391848 -0.0015880865 0.0022087661 0.0034839634 -0.0643261719 -0.0183199732 0.0209355533 0.0499218630 0.0153884762 -0.0208799552 0.1318480421 0.0336486642 -0.0361242552 0.0440123949 0.0171741709 -0.0112913564 -0.0642195315 -0.0218403558 0.0186296100 -0.5584152181 -0.2980040664 -0.0945921252 0.2615563605 -0.0063800683 -0.1800022506 -0.0149998261 -0.0032312153 0.0054534115 0.2938382623 0.1531730358 0.0499995623 -0.4531141830 -0.0232515277 0.3501636568 -0.0029221145 0.0017346028 -0.0007448313 0.0023360004 -0.0018951476 -0.0000062674 0.0053469740 -0.0032005865 0.0010255748 0.0023253644 -0.0012337550 0.0013145804 -0.0026468661 0.0018692562 -0.0002527067 -0.0162379446 0.0141469465 0.0044093086 0.0115764126 -0.0044650368 0.0069101149 -0.0005131943 0.0002682118 -0.0001548013 0.0103696949 -0.0081879112 -0.0018001490 -0.0148588352 0.0061352159 -0.0100805408 -0.0092059979 0.0017664198 0.0383171690 -0.0240028953 -0.0100434714 -0.0308171997 -0.0006350616 -0.0000477950 -0.0018447546 -0.0008418484 0.0009340468 0.0015965814 0.0135549766 -0.0018997239 -0.0073345960 0.0051207944 0.0037512760 -0.0025794712 0.0010148782 0.0021899000 -0.0005530357 -0.0036817467 0.0019833719 0.0023025549 0.0071012455 0.0015833990 -0.0027560860 -0.0371712333 -0.0390078429 0.0173775585 -0.0046075495 -0.0011656547 0.0026442996 0.0004092609 -0.0009159847 -0.0002287840 -0.0104891551 0.0001295751 0.0068870610 -0.0039211107 0.0144670672 0.0029419936 -0.0024222940 -0.0006118923 -0.0012730657 -0.0011154612 -0.0011289032 -0.0005388596 -0.0007528040 -0.0004061456 -0.0003326238 0.0010694197 -0.0001464848 0.0005941430 -0.0048549785 -0.0001138571 -0.0046784011 0.0072392743 0.0095127733 0.0038758402 0.0010230265 0.0008425651 0.0005241441 -0.0001224185 0.0003417501 -0.0001062442 0.0065956909 0.0004568701 0.0038247501 0.0004039509 -0.0008606440 0.0002830748 0.0002910762 -0.0003961194 -0.0002354770 -0.0007079546 0.0009141992 -0.0002191661 -0.0006057732 -0.0001757205 0.0004046151 -0.0013551260 -0.0006479151 -0.0022251190 0.0002326142 -0.0005612690 -0.0003701410 -0.0013952931 0.0010152504 0.0014987478 -0.0018312570 0.0004454426 0.0002321173 0.0018426062 0.0009749473 -0.0000821321 0.0000283920 0.0000312388 -0.0000232229 0.0000336152 0.0000376737 -0.0000783109 -0.0000087753 0.0000367784 0.0000046047 0.0000072994 -0.0000888908 -0.0000218661 -0.0000348150 -0.0001723190 0.0000042033 -0.0003168231 -0.0001954731 -0.0001320543 -0.0000903768 0.0001743414 -0.0000593916 0.0000765555 0.0001741936 0.0000568943 0.0001575236 -0.0001303155 0.0000559693 -0.0012740577 0.0003683979 -0.0005855764 0.0000631548 0.0000640656 0.0000528899 -0.0002000818 0.0002013337 -0.0000811798 0.0005681586 0.0000501650 0.0003399205 -0.0003283841 0.0003515305 -0.0001532613 -0.0007236701 -0.0004925128 -0.0005936630 -0.0001954740 -0.0003380459 0.0008382256 -0.0008654381 -0.0007808511 0.0002495531 -0.0000665753 -0.0001874693 -0.0001708552 0.0007977500 -0.0005719033 -0.0016892088 -0.0004312793 0.0002750534 0.0006596930 0.0002083267 0.0004911101 0.0004629772 -0.0005639335 -0.0005169111 0.0000941423 0.0008584458 -0.0000898851 -0.0003969991 0.0020119708 0.0031879730 0.0036277690 -0.0005127445 0.0009767769 0.0022781668 -0.0018849094 -0.0032929350 -0.0017276134 0.0004772559 -0.0000874056 -0.0005809690 -0.0009635773 -0.0020195162 0.0003090407 0.0066513303 -0.0042324618 -0.0197017951 -0.0019563935 0.0014710017 0.0040922732 0.0002340493 -0.0000634852 -0.0014795119 0.0004971247 0.0000352830 0.0030759332 0.0013673287 0.0017805745 0.0032955469 -0.0000617696 -0.0007216108 -0.0026447445 0.0004236731 -0.0010173994 -0.0030840826 -0.0100173226 0.0046290177 0.0170916726 0.0116770042 0.0110195042 0.0208262738 0.0086104149 0.0004239930 -0.0242554665 -0.0154439141 -0.0129413937 -0.0281372412 0.0049853628 0.0022928615 -0.0023629950 -0.0003835650 -0.0001788856 -0.0000435014 -0.0046397540 0.0016238139 0.0006054468 -0.0001966838 0.0001586456 -0.0000949488 -0.0133096941 0.0223549238 0.0667216787 -0.0584869256 -0.0048804427 0.0373747342 0.0176555951 0.0115498042 -0.0032647633 -0.0002798319 -0.0020341866 0.0000355944 0.0003189568 -0.0005904141 0.0004375382 0.0017065721 0.0003097467 0.0001530259 -0.0006607431 -0.0003330303 0.0003004964 -0.0104266786 -0.0617078911 -0.0595548260 0.0826893949 0.1096868932 0.0571735878 -0.0024027291 0.0018792273 -0.0033326977 0.0007028751 -0.0004463770 -0.0030428025 0.0007710059 0.0009056658 -0.0017105518 -0.0021801609 -0.0022043774 -0.0032050206 -0.0067902153 0.0009714779 0.0002388394 -0.0032137601 0.0016762860 0.0015017034 0.0045240850 -0.0011542725 -0.0018113083 0.0001824412 0.0006941160 -0.0015620676 0.0018645974 -0.0006320420 0.0001460218 -0.4287793283 -0.0340753310 0.0947480569 -0.3316068255 -0.1744964719 0.2627338078 0.3584385391 -0.2460771065 -0.5436523306 0.0001408805 -0.0000021338 -0.0001027243 0.0004154264 0.0001745996 -0.0001033131 -0.0003719298 -0.0000774609 0.0001580337 -0.0006201977 -0.0001750206 0.0001213082 -0.0002382458 -0.0001162508 0.0000704891 0.0003310119 0.0000980372 -0.0000996430 0.0035508452 0.0017132264 0.0007180160 -0.0022674018 -0.0001367921 0.0018649101 0.0001210727 0.0000206180 -0.0001590758 -0.0022122838 -0.0009593799 -0.0005075344 0.0024779358 0.0001778620 -0.0019873808 0.0003175556 -0.0001981987 0.0000995002 -0.0002081319 0.0001442385 -0.0001112021 -0.0008578549 0.0004424111 -0.0002113193 -0.0003026345 0.0001550842 0.0000118863 0.0003497745 -0.0002947522 0.0001133380 0.0032182158 -0.0029189009 -0.0010711640 -0.0012642944 0.0004637147 -0.0009480176 0.0001616115 -0.0000238844 0.0000162550 -0.0012345630 0.0018697117 0.0002912540 0.0036773138 -0.0011378385 0.0025940424 0.0000283006 -0.0000220260 0.0000251342 0.0000991550 0.0000243915 0.0000544292 0.0000657992 -0.0000287497 0.0001553353 0.0000691494 -0.0000992706 -0.0001140843 -0.0001093911 0.0000037199 0.0000571964 0.0000549958 -0.0000488969 -0.0000429255 -0.0000284367 -0.0000014634 0.0000135528 0.0000248733 0.0000043280 -0.0000163435 -0.0001372159 0.0000190557 0.0000839849 0.0002962058 0.0003458516 -0.0001473570 0.0000871604 -0.0000628910 -0.0000592419 -0.0000681539 0.0000198361 0.0000370724 0.0003341965 -0.0001357960 -0.0003423189 -0.0002103784 0.0005938041 0.0001951084 0.0002113165 -0.0000719480 0.0001274124 0.0003361657 0.0000599485 0.0001607665 0.0001468734 0.0001211268 0.0000502058 -0.0001411259 -0.0000213189 -0.0000728303 0.0014523667 0.0000074204 0.0011715970 -0.0014699332 -0.0021282356 -0.0007824687 -0.0001350343 -0.0000396722 -0.0000708478 -0.0000986603 -0.0000672808 -0.0000518489 -0.0008353941 0.0000104174 -0.0005084653 -0.0003620539 0.0006575172 -0.0002817013 0.0144501793 -0.0027122741 -0.0313676601 0.0103318827 0.0354951532 0.0414725018 -0.0840536785 -0.0391585599 -0.0182397026 -0.0769742885 -0.0829943057 -0.0573978367 0.0087910522 -0.0132109283 -0.0362856539 0.0429785956 0.0774189337 0.0444778419 -0.1127771805 -0.0285352942 0.0420984355 0.0974741961 0.0403295217 0.0304372128 0.0011462650 -0.0004477829 -0.0004721643 -0.0150280018 0.0035804384 0.0074566595 -0.0000605012 0.0004192541 0.0000581463 -0.0006321303 0.0003571972 0.0003303183 0.0008799580 -0.0019668596 -0.0007540411 -0.0006982849 -0.0011976886 -0.0003609570 -0.0005049234 0.0002073127 -0.0004370752 0.0001886492 0.0007910100 0.0001592513 0.0002975615 -0.0002055085 0.0000869842 -0.0037925499 0.0014341815 -0.0020372131 -0.0001602158 0.0000150492 0.0003777129 -0.0010702747 0.0012589442 0.0001791763 0.0040810000 -0.0032014105 -0.0014009870 -0.0048765328 0.0083261600 0.0055658645 -0.0031487110 -0.0028102856 -0.0038249858 0.0122266628 0.0927494045 0.0921894924 -0.0279729877 -0.0156675462 0.0213076687 -0.0119926486 -0.0063369495 0.0097889244 0.0337233056 -0.0470831512 -0.1373492671 -0.0247891544 0.0207169823 0.0710737684 0.0192880450 0.0441417317 0.0335525209 -0.0341068514 -0.0526362658 -0.0200541130 0.0420159711 -0.0128965381 -0.0788345914 0.1451960039 0.3814055809 0.3268800002 -0.1013229761 0.1252728869 0.3522450276 -0.1622732854 -0.3513451829 -0.2059754839 0.0606852686 0.0277564689 0.0332622435 -0.0869920313 -0.0068492869 -0.0157746812 0.0290551454 -0.0914604807 -0.2502292689 -0.0280418895 0.0123615480 0.1514614165 0.0006309593 0.0012711285 0.0048151052 0.0157570185 0.0149513305 0.0060868507 0.0122875684 0.0171120620 0.0318854286 -0.0244251985 -0.0256873821 -0.0360543133 0.0305611150 0.0125431402 -0.0374293568 0.1492129801 0.0220132530 -0.2589929538 -0.0045974859 -0.0135092688 -0.0010522722 0.0114025045 -0.0251623859 -0.1271826525 -0.0478911480 -0.0773697124 -0.1870960796 0.0714562321 0.0468181813 -0.0109010072 -0.0066862381 -0.0036104453 -0.0031816860 -0.1312935493 -0.1311157884 0.0825754925 -0.0009847467 0.0007862496 -0.0003090161 -0.0082098686 0.0079650981 -0.0115482613 -0.0011220260 0.0017523542 0.0013937658 -0.0001504039 -0.0010804157 -0.0003189823 -0.0003240624 -0.0003259395 -0.0002347671 0.0002080961 0.0001573490 0.0002509564 -0.0003357485 0.0004239146 -0.0000915423 0.0003541406 0.0002017805 0.0000730224 0.0046493492 0.0004390033 -0.0009933686 -0.0043968234 -0.0007326840 0.0002455318 -0.0000624540 0.0000345403 -0.0000326581 -0.0004701215 0.0003034470 -0.0021520283 -0.0001428057 -0.0001280839 0.0009279969 0.0009262502 -0.0007069089 0.0023278776 0.0031636028 -0.0011259731 -0.0004318737 0.0019346924 -0.0002494708 0.0008084155 -0.0019102549 0.0005168681 0.0009253706 0.0004762132 -0.0002216978 -0.0004077687 -0.0004468037 -0.0000055843 -0.0000517214 0.0092603249 0.0032480561 0.0020666994 0.0113308358 0.0024106345 -0.0084198922 -0.0075142772 0.0034373363 0.0148551067 -0.0000159346 -0.0003327854 -0.0003351012 -0.0002993846 -0.0001129564 -0.0002783261 0.0002315913 0.0000637241 -0.0006451428 -0.0019074894 -0.0005602348 -0.0004505295 -0.0005569112 0.0000386446 0.0009669755 0.0006045400 0.0006225095 0.0006065037 -0.0003496392 0.0008365671 -0.0006610031 0.0055156042 -0.0060560807 0.0007584719 0.0008869849 0.0001375563 -0.0002572011 0.0039784058 0.0031787022 0.0023353079 0.0016781448 0.0011445302 -0.0005871340 0.0001303727 -0.0001859383 -0.0000748196 0.0000037749 -0.0001582813 -0.0003642623 -0.0005776222 0.0003374235 -0.0001787918 -0.0000594205 0.0002436850 0.0003255635 0.0002033246 -0.0001924118 0.0002686743 0.0045674171 -0.0038439408 -0.0020144406 -0.0015390767 0.0002140947 -0.0015845377 0.0001541526 -0.0000993907 0.0000818828 -0.0015175331 0.0017262341 0.0009844802 0.0050770093 -0.0006685273 0.0032748519 -0.0001475763 -0.0002088803 0.0004923712 0.0000497498 0.0002366057 0.0001948303 0.0000221418 -0.0000093974 -0.0000619383 0.0000223910 0.0000077610 0.0000322672 0.0016503610 -0.0008365709 -0.0009504007 0.0004108901 0.0006627991 -0.0001899929 -0.0001474923 0.0004865955 0.0001342707 -0.0002467968 0.0005169632 0.0001917724 -0.0028247195 0.0012802628 0.0017363257 -0.0032371873 -0.0031156645 0.0015344337 -0.0002708348 -0.0002684542 0.0001624772 -0.0000108006 -0.0001155854 -0.0000055097 0.0020181186 -0.0008690567 -0.0017460859 -0.0010016790 0.0037245012 0.0009423001 0.0008280236 -0.0003454077 0.0005378414 0.0016069237 0.0000293107 0.0008205692 0.0001219864 0.0003867436 -0.0000156295 -0.0002434482 0.0000273891 -0.0001331948 0.0030810669 0.0001498724 0.0024185838 -0.0039234391 -0.0056712154 -0.0019515955 -0.0003963318 -0.0001943276 -0.0001894882 -0.0003834084 -0.0002894002 -0.0001967658 -0.0025669280 -0.0000681263 -0.0015834755 -0.0018332373 0.0035542540 -0.0013113488 0.0040183736 -0.0075583634 0.0044554761 -0.0157914719 0.0160494955 -0.0031613619 0.0045069457 0.0226245071 0.0348949872 0.0038159636 0.0085664854 -0.0157863123 0.0061248389 -0.0016871327 0.0026902000 -0.0316708635 -0.0044338466 0.0078719936 0.0017177651 0.0149116806 -0.0045884482 0.0018675108 0.0010662731 -0.0064068632 -0.0080382982 0.0078993710 0.0036374409 0.2080891843 -0.0288830208 -0.1043017709 0.0075373645 0.0102935086 -0.0020611955 0.0133640194 -0.0114862870 -0.0151193705 -0.0092864917 -0.0128668515 0.0041128326 0.0100841293 0.0288100478 0.0052770566 0.0514976176 0.0081849976 0.0281981005 0.0047604434 -0.0284071770 0.0005071740 -0.0285368775 -0.0170074691 -0.0096082655 0.5938888076 -0.1113500883 0.2993483397 -0.0185091015 -0.0065894664 -0.0059281673 -0.0034428691 0.0030309150 -0.0010979662 0.0009153948 0.0007855067 0.0014544154 0.0012815617 -0.0017153170 -0.0019470563 0.0002362904 0.0002532422 -0.0006979630 0.0019538289 -0.0010869393 0.0014048999 -0.0005912617 -0.0005752471 0.0002734532 -0.0000604575 -0.0001059132 -0.0000683888 0.0005388441 -0.0006246328 -0.0017689491 -0.0002973415 0.0001823254 0.0007307777 0.0002467432 0.0005891791 0.0004616077 -0.0005186322 -0.0006548328 -0.0001172530 0.0007303894 0.0004523944 -0.0006889062 0.0014348102 0.0034076064 0.0031640696 -0.0008872467 0.0013378630 0.0035095183 -0.0013960808 -0.0037297162 -0.0016731821 0.0008024071 0.0002830328 0.0002442228 -0.0015956767 -0.0000837866 -0.0006515073 0.0004167486 -0.0029209922 -0.0024392924 -0.0003948340 0.0003191719 0.0028012251 0.0000561115 0.0000496825 -0.0000513864 0.0002316515 0.0002681641 0.0001403750 0.0001914363 0.0001873751 0.0007122641 -0.0006076227 -0.0004962490 -0.0005116539 0.0005881815 0.0002386812 -0.0007018185 0.0026260693 0.0003398892 -0.0045370465 -0.0011255575 -0.0001864811 -0.0010956312 0.0001776345 -0.0008260676 -0.0019110254 -0.0006348888 -0.0011887298 -0.0030663852 0.0018041540 0.0010404041 -0.0003873268 -0.0005314247 -0.0005109053 -0.0000810773 0.0017644056 0.0003167445 0.0001361372 0.0607027773 -0.0415764351 0.0107273098 -0.0002004284 -0.0000944489 -0.0002786779 0.0001520206 0.0001058556 -0.0000350955 0.0001220123 0.0002214631 0.0001142133 -0.0001083199 -0.0000724389 0.0000466187 0.0000236531 0.0000403749 -0.0001514847 -0.0001205241 0.0000349366 -0.0000107534 -0.0000100197 0.0000676235 0.0000641589 -0.0003205641 -0.0002986780 -0.0001090422 0.0003810970 0.0003235355 0.0001164723 0.0002334790 0.0003426987 -0.0000171888 0.0003947770 -0.0000089877 0.0002887912 -0.0002327048 -0.0006617802 0.0007808089 0.0008431834 0.0011581712 0.0000378440 -0.0001127611 -0.0000710754 -0.0000205532 0.0015194026 -0.0005251508 -0.0003637888 0.0003411217 0.0000451298 -0.0003041425 0.0002137587 -0.0003862140 -0.0004472356 0.0002092437 -0.0004381393 -0.0002293322 -0.0016299200 -0.0002046614 0.0003252560 -0.0015157800 -0.0004944658 0.0011390581 0.0011527993 -0.0007038720 -0.0017649633 0.0275427442 0.0091240182 -0.0075708929 0.0027617865 0.0000302167 -0.0021955159 -0.0074437097 -0.0057368236 -0.0045639429 -0.0000430616 0.0003683136 0.0007063603 -0.0057348124 0.0019511456 0.0081160348 0.0045604249 0.0015013366 -0.0007528783 -0.0387049912 -0.0205651759 -0.0147493453 -0.0165041822 -0.0062168348 0.0024209997 0.0003938577 0.0000184628 -0.0001555958 -0.0237406073 -0.0085891811 0.0045771342 -0.0280205842 0.0028943805 0.0280559917 0.0073809879 -0.0023312402 0.0067226584 -0.0133581960 0.0172201644 0.0144950400 -0.0036044492 0.0010893767 -0.0027419627 -0.0166516810 0.0019271724 -0.0201499167 0.0117144080 -0.0075296660 0.0024900911 -0.0781358199 0.0729660693 0.0464371647 -0.0406320873 0.0276542955 -0.0063160609 0.0014544165 -0.0007333544 0.0003457857 -0.0527044133 0.0355923353 -0.0074930529 -0.0547048457 0.0133907847 -0.0556851419 0.0002535520 0.0000679506 -0.0001546068 0.0001209284 0.0000376810 -0.0000563871 0.0009222279 -0.0003571590 0.0008925325 0.0005014495 -0.0003712772 -0.0002568626 -0.0522097142 0.0145030315 0.0293604198 -0.0227669647 -0.0130775925 0.0141052233 0.0044909370 -0.0085876232 -0.0031713409 0.0079545885 -0.0140670550 -0.0058605340 0.0455063419 -0.0216872981 -0.0302436556 0.1034819633 0.1027990087 -0.0497832396 0.0114136044 0.0080708844 -0.0068679261 0.0005012948 0.0046325997 -0.0001181277 -0.0217898655 0.0176787191 0.0215383410 0.0313211437 -0.1109247307 -0.0267909943 -0.0489287372 0.0419224897 -0.0308072463 -0.1505883100 0.0028307890 -0.0783455542 0.0128797500 -0.0278408834 0.0123843665 0.0029897008 -0.0096592753 0.0026216685 -0.1248242756 -0.0174358419 -0.1012643306 0.1950195054 0.2818445883 0.0911649846 0.0230012386 0.0234415050 0.0103055208 0.0327650065 0.0297810832 0.0164883468 0.2037239984 0.0147023538 0.1221075035 0.1681369123 -0.3252280593 0.1165523436 0.0001104190 -0.0000427275 0.0000502235 0.0000085479 0.0003745797 0.0005500494 0.0000557331 0.0004261991 0.0005581864 0.0002255094 0.0001161763 0.0000343513 -0.0000599375 0.0000286514 -0.0000350385 0.0000017790 0.0003971972 0.0003208825 0.0007579126 -0.0001994673 -0.0003730176 0.0003088478 0.0000383358 0.0006966929 -0.0230453955 0.0208665696 0.0098324861 0.5694602686 -0.0824791628 -0.2849141438 0.0093369057 0.0271378889 -0.0002156588 0.0515141051 -0.0205564915 -0.0254280255 0.0109610459 -0.0415639318 -0.0115251464 -0.0184062326 -0.0107977077 -0.0109281254 -0.0217247164 0.0029816553 -0.0044611237 0.0030355631 0.0093000810 0.0021408317 0.0099852131 0.0043146877 0.0030107024 -0.1976155482 0.0376926435 -0.0992220014 0.0129664934 0.0050197453 0.0078883581 -0.0215867870 0.0186286263 0.0102773949 0.0007965202 0.0005086958 -0.0019289491 0.0003359517 -0.0012089539 0.0017399223 -0.0001786607 -0.0005233376 0.0019713573 -0.0008826888 0.0037880704 -0.0018709548 0.0010299055 0.0009832746 -0.0002520251 -0.0001753054 0.0000452319 0.0003378430 -0.0000693791 -0.0002553526 -0.0002426221 -0.0001812729 0.0002721805 0.0005787074 0.0001012483 0.0001467813 0.0000510059 -0.0000430173 -0.0001272686 -0.0000717031 0.0002516682 -0.0007238686 -0.0010314915 0.0013465115 0.0031036707 0.0027718572 -0.0008846738 0.0007949817 0.0026265005 -0.0007384495 -0.0030402731 -0.0013907269 0.0001411270 -0.0002287299 0.0002941089 -0.0002662096 0.0002043810 -0.0003049752 0.0013517304 -0.0011483718 -0.0028719197 -0.0003757049 -0.0000383647 0.0012164579 -0.0000056715 0.0001160231 0.0001789332 0.0004900801 0.0002633095 -0.0003035826 -0.0001708574 -0.0005096903 -0.0005055446 -0.0002317981 -0.0001121738 0.0003736740 0.0004713305 0.0003480026 0.0000151576 0.0033440118 0.0009107981 -0.0070712797 -0.0039197675 -0.0018312228 -0.0058618034 -0.0029262835 -0.0001146335 0.0062607016 0.0015229273 0.0014932634 0.0018298986 0.0004798632 0.0000425283 0.0002025559 0.0002751059 0.0003773763 -0.0004090577 -0.0035494449 -0.0043238949 0.0028486492 -0.0227495949 0.0152277598 -0.0032344004 -0.0001421097 -0.0001531593 -0.0002260203 0.0001165031 -0.0000567497 -0.0001804164 -0.0000012388 0.0000317032 0.0001143347 0.0000459849 0.0000863582 -0.0000635128 0.0000082668 -0.0000156110 -0.0000095475 -0.0003263044 0.0000640844 -0.0000796726 -0.0000117317 -0.0000369486 0.0000704263 -0.0000520866 0.0000278367 0.0000651036 -0.0000272273 -0.0000692554 -0.0000193543 -0.0000042273 -0.0004701537 0.0002027823 -0.0002769690 -0.0000355000 0.0004642558 0.0000024282 0.0002074283 -0.0000943224 0.0001065340 -0.0008349290 0.0011562264 0.0023416945 -0.0003117692 -0.0001307201 -0.0002041061 0.0000754934 0.0005902569 0.0001492151 -0.0000052870 -0.0002123905 0.0001153687 0.0000175081 -0.0002387729 -0.0000509230 0.0000531110 0.0001039056 0.0002327712 -0.0000254179 -0.0003288063 0.0000140624 0.0000808094 -0.0000191840 -0.0002122384 0.0001616893 0.0002610295 0.0748669016 0.0243213496 -0.0169518898 0.0049109606 -0.0009914051 -0.0062163165 -0.0179100857 -0.0148985570 -0.0131783475 0.0043699180 0.0021855635 0.0007683031 -0.0143290859 0.0052828081 0.0208033061 0.0096636303 0.0032611274 -0.0025389663 -0.1285116499 -0.0693471565 -0.0450182032 -0.0388159163 -0.0159431323 0.0026499385 0.0009372508 0.0000992487 -0.0001538308 -0.0524530521 -0.0169598596 0.0136192011 -0.0816271164 0.0028174182 0.0815187138 -0.0024383273 0.0006767160 -0.0025899318 0.0045933071 -0.0061449303 -0.0054716527 0.0004060957 0.0000747538 0.0006974126 0.0059082244 -0.0006245660 0.0072450368 -0.0036716861 0.0024475661 -0.0010336006 0.0329792770 -0.0312512805 -0.0187720698 0.0145098375 -0.0099590063 0.0021495198 -0.0004958956 0.0002879663 -0.0000684870 0.0171243913 -0.0108931318 0.0033893870 0.0212561204 -0.0068369435 0.0219203026 0.0003372554 0.0002385581 0.0011157373 -0.0007308818 -0.0003852599 -0.0014984134 -0.0002206993 0.0001278681 0.0000115910 -0.0000489899 -0.0000425755 -0.0001977899 -0.1395284568 0.0530847195 0.0800639221 -0.0519766973 -0.0121523231 0.0274993791 0.0159713974 -0.0333241925 -0.0117297113 0.0191109897 -0.0392618899 -0.0146791298 0.2388985840 -0.0970023673 -0.1524462939 0.2381127755 0.2268124644 -0.1150636516 0.0156280792 0.0173090377 -0.0102704986 0.0059143019 0.0058067475 -0.0030008679 -0.1535584560 0.0621536417 0.1260329443 0.0906509847 -0.3215336617 -0.0833202574 0.0157131370 -0.0042801400 0.0061905832 0.0524187394 0.0040947108 0.0272130750 0.0008107256 0.0059645433 -0.0008504019 -0.0034708289 0.0011756672 -0.0019096589 0.0833057933 -0.0013890162 0.0641466888 -0.0726541130 -0.1056942039 -0.0362205197 -0.0104874204 -0.0108025263 -0.0048562692 -0.0106437847 -0.0109508105 -0.0052850974 -0.1170645523 -0.0037632624 -0.0686803955 -0.0484376225 0.0867183094 -0.0328901065 0.0000282480 -0.0000104020 0.0001250338 -0.0000515921 0.0000585024 0.0000150178 0.0002177287 0.0003018758 0.0003327149 0.0001792368 0.0002211914 0.0000402047 0.0000231616 0.0000611208 0.0001342573 0.0000067927 -0.0004092039 -0.0003556941 0.0005323738 -0.0000018679 -0.0000940180 -0.0001736223 0.0000455325 -0.0001554018 -0.0147798583 -0.0737137109 -0.0086848826 -0.4413796846 0.1429427433 0.2260342654 -0.0275653228 0.0513834073 0.0217261939 0.0179704149 0.0353010973 -0.0121646243 0.0400459236 -0.1442245874 -0.0324551566 -0.0814651991 -0.1218880377 -0.0367504868 -0.0092842995 0.0386377810 -0.0134863552 0.0395531537 0.0420773292 0.0214901081 -0.0061317004 -0.0718596290 -0.0118159090 0.4180972778 -0.0008033458 0.2043188285 0.0644710203 0.0366377317 0.0301386187 -0.0492183936 0.0563471060 0.0281018350 0.0007794485 0.0034384211 -0.0080278605 -0.0001297946 -0.0022599000 0.0070171840 -0.0014444952 -0.0022170723 0.0059382078 -0.0145934396 0.0229676458 0.0142232850 0.0064578004 0.0069185322 -0.0007619243 -0.0021441099 -0.0001997224 0.0034645484 0.0025355572 0.0001298969 -0.0042253966 -0.0024498195 0.0015288538 0.0058177549 0.0010938945 0.0012720383 0.0004238100 -0.0026022324 -0.0022786851 -0.0006028401 0.0047314408 -0.0048892369 -0.0116696804 0.0149548031 0.0374094723 0.0318683159 -0.0073682495 0.0070294884 0.0205562652 -0.0116094529 -0.0466117793 -0.0197487194 -0.0009117661 0.0028858258 0.0047646464 0.0072362210 0.0018089008 0.0097485499 -0.0303902713 0.0429145774 0.0534564824 0.0047537319 -0.0038213490 -0.0281232560 0.0007552003 0.0007819185 0.0005789947 -0.0009396074 -0.0018889493 -0.0041223501 -0.0041059011 -0.0049144011 -0.0088117634 0.0048379331 0.0051258819 0.0079659841 -0.0059773458 -0.0024788496 0.0067317233 -0.0179556736 -0.0038173395 0.0302154306 -0.0017196829 -0.0022482650 -0.0059409343 -0.0098134612 0.0053832429 0.0422258752 0.0123083047 0.0179252461 0.0411856560 -0.0075199672 -0.0052087066 0.0030116519 0.0010601091 0.0021382484 -0.0016301322 -0.0286092283 -0.0347057669 0.0204962914 -0.0714872385 0.0553855818 -0.0316031728 0.0045373103 0.0024802843 0.0052416711 0.0001007901 0.0008863997 0.0014311856 -0.0004980925 -0.0017608798 -0.0016779465 -0.0001282845 -0.0002205887 -0.0000428566 -0.0000321862 0.0001788272 0.0000879370 -0.0006609054 0.0003506104 -0.0001110553 -0.0000316155 0.0004032897 0.0002303969 -0.0000994920 0.0005690314 0.0004940790 -0.0000821861 -0.0004881610 -0.0004686767 0.0003798285 0.0014663886 -0.0000741363 0.0015983795 0.0001940453 -0.0020071848 -0.0001897220 -0.0012165114 0.0011561827 0.0016356019 0.0003739934 0.0025588721 0.0026444027 -0.0019603238 -0.0007287310 0.0030201223 -0.0005826010 0.0004531876 0.0001744244 0.0003332803 0.0000177675 0.0005753941 -0.0012204159 -0.0011810139 0.0006522343 -0.0012130330 -0.0007072261 0.0014978414 0.0000162069 -0.0001870615 0.0013939774 0.0003646848 -0.0012364796 -0.0011365338 0.0008641989 0.0018708798 0.0828436435 0.0297445358 -0.0378823112 0.0285748686 0.0105028480 -0.0025355085 -0.0297951444 -0.0198732977 -0.0112844199 -0.0140407295 -0.0065480189 -0.0010328696 -0.0205859154 0.0061087513 0.0287794737 0.0161048815 0.0051319385 0.0010312478 -0.0274972065 -0.0295168244 -0.0183298574 -0.1079860270 -0.0154466015 0.0484177331 0.0006681719 0.0006077672 -0.0002954898 -0.0774432354 -0.0223255940 0.0168969310 -0.0762087822 0.0117402216 0.0808622892 -0.0230791755 0.0152316904 -0.0005849985 0.0212688418 -0.0242151521 -0.0156350912 0.0133726940 -0.0101039848 -0.0013978773 0.0228594823 -0.0024221616 0.0294950697 -0.0167791788 0.0094154811 0.0016939737 0.0355692988 -0.0435666866 -0.0292967875 0.0854853794 -0.0434664864 0.0318189932 -0.0007107770 0.0005792897 -0.0001845909 0.0706803698 -0.0412722635 0.0128492571 0.0793746806 -0.0118702813 0.0773059130 0.0013991844 -0.0001850375 -0.0049932423 0.0047828350 0.0017237740 0.0043628510 -0.0020938202 0.0000624768 -0.0050351705 -0.0036145233 0.0034010948 0.0047789839 0.0237489869 0.0164213726 -0.0104804162 0.0425607345 0.0536238106 -0.0186465800 0.0067692593 -0.0064168320 -0.0049965408 -0.0012136611 0.0053440805 0.0009268176 0.1554655627 -0.0409649999 -0.0884592842 -0.0853978260 -0.0991871666 0.0397406783 -0.0352258360 -0.0142135289 0.0175912587 0.0037354136 -0.0189326007 -0.0029974751 -0.2561164894 0.0384460895 0.1726468363 0.0104772223 -0.0599007152 -0.0171039876 -0.0183452061 0.0571386219 -0.0139946929 -0.0092367944 0.0214070462 -0.0048686971 0.0287676950 -0.0211515795 0.0160428258 -0.0099139504 -0.0140286443 -0.0036858754 0.2508799026 -0.0444647607 0.1727732509 -0.0467987460 -0.0772125690 -0.0274126056 -0.0092947258 -0.0037681047 -0.0055385187 0.0004830102 0.0020345870 -0.0000507857 -0.1594367569 0.0119256827 -0.0863168706 0.0389054199 -0.1024410798 0.0289299616 -0.0011773289 -0.0001414653 -0.0024247441 -0.0000031104 -0.0031647928 -0.0041405504 -0.0038080021 -0.0049407075 -0.0060259284 -0.0039878971 -0.0040678032 -0.0018245423 -0.0015708547 -0.0012517572 -0.0015652863 0.0031872759 0.0033710030 0.0020350803 -0.0093190921 -0.0029734624 0.0038397939 0.0008090570 -0.0008082864 0.0019864637 -0.0022747780 -0.0091452668 -0.0009470428 -0.0514182363 0.0161598612 0.0264614887 -0.0039154416 0.0056613014 0.0028233904 0.0023188460 0.0043792130 -0.0012794757 0.0050182506 -0.0166729334 -0.0039828884 -0.0068697010 -0.0117947228 -0.0030253787 -0.0011226636 0.0036372752 -0.0016151970 0.0040939794 0.0040967414 0.0022268085 -0.0003036872 -0.0075267276 -0.0011060442 0.0379139987 0.0003191718 0.0185326975 0.0055411900 0.0032125916 0.0034516207 -0.0062231313 0.0068165216 0.0031920116 0.0012529691 -0.0002881195 -0.0022472645 -0.0010485861 0.0010933122 0.0018388305 -0.0024629014 -0.0012978336 0.0024053760 0.0812607733 -0.1516527175 -0.1226023928 -0.0109536825 -0.0181026228 -0.0069212676 0.0128923092 0.0032406326 -0.0173059264 -0.0322637312 0.0060697871 0.0624679844 0.0205258275 -0.0079360473 -0.0451436786 -0.0106594352 -0.0177989056 -0.0095241726 0.0267226635 0.0302012760 0.0052069124 -0.0435946021 0.0113101597 0.0775011004 -0.1020530847 -0.2693315457 -0.2306225453 0.0482908293 -0.0579958170 -0.1578949396 0.1129214559 0.3228590628 0.1530700787 0.0023319718 -0.0291634669 -0.0457750931 -0.0373169267 -0.0172529626 -0.0570742030 0.2236288812 -0.2772448821 -0.3990470974 -0.0391192053 0.0242528396 0.1840446670 -0.0044942790 -0.0038966504 -0.0029856207 0.0118145637 0.0160140719 0.0261317468 0.0234365405 0.0245912079 0.0479477991 -0.0307252501 -0.0319821325 -0.0449965169 0.0423562591 0.0189444019 -0.0424720200 0.1514990179 0.0307332863 -0.2597139292 -0.0205276247 0.0045320520 -0.0091819711 0.0303355201 -0.0311303535 -0.1968229535 -0.0662674500 -0.1046313507 -0.2498377886 0.0444318690 0.0272402267 -0.0166386507 0.0062072655 0.0025053886 0.0038708093 0.1469550504 0.1444439697 -0.0932270543 -0.0076632739 0.0059100070 -0.0034431624 -0.0226850667 0.0120172199 -0.0087398340 -0.0130824589 0.0024223803 0.0105880038 -0.0010116837 -0.0062641036 -0.0048560692 -0.0005056469 -0.0001488746 0.0000272242 0.0005357029 0.0003361157 0.0004136602 -0.0000267284 0.0008011388 -0.0002004814 0.0010181309 0.0002361020 -0.0004490260 0.0217361057 0.0021918585 -0.0109679332 -0.0128842488 0.0004340577 0.0087763629 -0.0015815058 -0.0003032952 -0.0016707689 -0.0018310421 0.0006937685 -0.0036167464 0.0005716125 0.0001239571 0.0000443005 0.0005063305 -0.0010644179 0.0021109970 0.0011930205 -0.0013664240 -0.0007648024 0.0032261960 -0.0001745235 0.0015253909 -0.0061411490 0.0009597230 0.0038594588 0.0002833014 0.0011958772 0.0008680566 -0.0008248165 0.0013340310 0.0002504943 0.0246530446 0.0084262465 -0.0037927755 0.0232118461 0.0104098321 -0.0113797094 -0.0153681929 0.0049239978 0.0210406143 0.0101418186 0.0040437103 -0.0040544803 0.0040531344 0.0014775639 -0.0005157303 -0.0039696036 -0.0024327221 -0.0009545632 -0.0020579828 -0.0005656280 0.0005317229 -0.0028778110 0.0002884443 0.0030466566 0.0024788642 0.0004969292 -0.0005599966 0.0011158888 -0.0024979227 -0.0011125272 -0.0178504342 0.0000054414 0.0077803407 0.0005496698 -0.0000244491 0.0000583487 -0.0137839829 -0.0045793561 0.0003983719 -0.0057972753 0.0010381764 0.0067872424 -0.0024148733 0.0016032357 0.0000163948 0.0021814885 -0.0025228314 -0.0017380522 0.0013489005 -0.0010472715 -0.0001893774 0.0024520743 -0.0002218089 0.0032394548 -0.0017482857 0.0010290133 0.0001309260 0.0045886370 -0.0050398385 -0.0033899628 0.0083751004 -0.0046218190 0.0030160403 -0.0000014327 -0.0000528853 -0.0000513266 0.0073436723 -0.0040880830 0.0015416688 0.0082584809 -0.0019895561 0.0087641317 0.0002155838 -0.0001149525 -0.0003982297 0.0003559367 -0.0000728849 0.0002201164 -0.0002169830 0.0000189940 -0.0006095429 -0.0004113602 0.0004563172 0.0006069536 0.0031876880 0.0028625032 -0.0013121123 0.0060146460 0.0073613737 -0.0026857868 0.0008126500 -0.0012943508 -0.0006790170 -0.0001567197 0.0006280543 0.0001152701 0.0225490095 -0.0064131960 -0.0127488488 -0.0112474257 -0.0132108928 0.0052955245 -0.0049016124 -0.0019796452 0.0024836183 0.0006220931 -0.0025474881 -0.0004703011 -0.0357551351 0.0053801340 0.0242302448 0.0014943391 -0.0078442121 -0.0022990698 -0.0024999057 0.0056947578 -0.0017898920 -0.0003914966 0.0022429899 -0.0002066262 0.0027091991 -0.0022150267 0.0014851568 -0.0007708844 -0.0014949972 -0.0002288697 0.0260692902 -0.0046876637 0.0179486446 -0.0035488415 -0.0064087733 -0.0021690349 -0.0008216120 -0.0005232133 -0.0004838545 -0.0000849429 0.0001039282 -0.0000697610 -0.0175395459 0.0011507249 -0.0095084917 0.0033227341 -0.0092552259 0.0025408926 0.0085767512 -0.0077252414 0.0059450616 -0.0155461980 0.0261177735 0.0053625707 0.0066830282 0.0162224053 0.0302600149 -0.0046858808 0.0079325184 -0.0299895626 0.0095338044 -0.0033925326 0.0011045756 -0.0304226500 0.0020275150 0.0138769994 0.0041615424 0.0208417657 -0.0095228042 0.0179592153 0.0118795196 -0.0117355865 0.0233083923 0.0564016765 0.0018909941 0.2081476272 -0.0449724444 -0.1046338049 0.0472830814 -0.0098669732 -0.0253854910 -0.0133624421 -0.0183007312 -0.0025904034 -0.0304405967 0.0564538567 0.0193116128 -0.0530106867 -0.0504931641 -0.0244095516 -0.0094699467 0.0257992673 0.0010601751 0.0484318617 0.0004602866 0.0249632601 0.0055555052 -0.0645928986 -0.0058162973 0.2092127639 -0.0180375992 0.1042476497 0.0460714654 0.0250094115 0.0146858978 0.0316795881 -0.0345935354 -0.0110839132 0.0059056453 -0.0005375707 0.0000099856 -0.0091867097 0.0118264077 0.0071732597 -0.0105427309 -0.0107935718 -0.0084294569 -0.0043326241 0.0033981425 -0.0046088397 0.0040502647 0.0038440876 -0.0016205757 -0.0006876694 -0.0000793930 0.0010081772 -0.0019719087 0.0009888699 0.0037485733 0.0004147733 0.0003515146 -0.0002991946 -0.0002807456 -0.0011515720 -0.0012775214 0.0014226582 0.0017934630 0.0005519578 -0.0014000566 -0.0030702761 -0.0009468845 -0.0001406515 -0.0003952877 -0.0008746839 0.0006416023 -0.0018152514 -0.0031188484 -0.0009246629 0.0034814158 -0.0008356038 0.0000209178 -0.0008541024 -0.0012020338 0.0009111261 -0.0012724246 0.0004789428 0.0078341161 -0.0065142617 -0.0096712432 -0.0009246072 0.0002853889 0.0006965809 -0.0006076906 -0.0005365581 -0.0000078724 -0.0002474322 -0.0004420714 0.0002648209 0.0013754810 0.0017061358 0.0018281911 0.0002405740 -0.0003596781 -0.0021306380 0.0002105126 0.0000576381 -0.0000930540 -0.0037151630 0.0007511856 0.0055124538 0.0066815890 0.0036446769 0.0102573445 0.0046765026 -0.0002296449 -0.0121272765 -0.0032655329 -0.0034094213 -0.0061757349 -0.0008263803 0.0001120815 -0.0002563938 0.0023550140 0.0025155201 0.0006157880 -0.0134119846 -0.0070221673 0.0041780309 -0.0630500968 0.0467556560 -0.0233761424 0.0100337814 0.0179199602 0.0166761349 -0.0060630335 0.0017914013 0.0065432143 -0.0023334148 -0.0095596150 -0.0076070430 -0.0000914728 0.0005964274 0.0000768244 0.0001130767 0.0001140210 0.0005742944 0.0032163882 0.0002864481 0.0012386012 0.0003720575 0.0003588156 -0.0002874463 0.0093801037 0.0034835807 -0.0023012406 -0.0061281917 -0.0018029163 0.0019823428 -0.0009976124 0.0016516552 -0.0014570472 0.0007865871 0.0003703331 -0.0040480746 0.0006804644 -0.0000832267 -0.0006022665 -0.0061653340 -0.0020491302 -0.0085467659 -0.0153068903 -0.0020930949 -0.0002168301 -0.0065212714 0.0031687448 -0.0051453911 -0.0028352311 0.0005949595 0.0020947500 -0.0002201423 0.0003129146 0.0011073760 -0.0001251744 0.0001246683 -0.0003951626 0.0168033626 0.0038752167 -0.0020817021 0.0154880353 0.0065798429 -0.0097802871 -0.0113339613 0.0054229622 0.0162292868 -0.0689135112 -0.0236700567 0.0260858668 -0.0209233809 -0.0078758316 0.0027427704 0.0213330966 0.0155512284 0.0104991738 0.0104473427 0.0041844170 -0.0005609654 0.0162094549 -0.0050151824 -0.0226270613 -0.0150086324 -0.0032850477 0.0031091554 0.0397660311 0.0358047697 0.0182656726 0.0800259191 0.0124441329 -0.0340441417 -0.0007272224 -0.0003106936 0.0002642753 0.0636933786 0.0201713731 -0.0131181650 0.0617752739 -0.0072399185 -0.0644069058 -0.0185555064 0.0127804290 -0.0009007728 0.0161222871 -0.0196412169 -0.0144181687 0.0109465960 -0.0078154492 -0.0001160662 0.0190225432 -0.0016827339 0.0247894109 -0.0162886212 0.0080718986 -0.0022004139 0.0400581107 -0.0497845717 -0.0283463464 0.0695290577 -0.0360389973 0.0252146200 -0.0006724814 0.0003013130 -0.0003536120 0.0609204109 -0.0371771922 0.0103006320 0.0684173971 -0.0127351132 0.0659810852 -0.0011180342 0.0000319298 0.0033061098 -0.0031215684 -0.0011292522 -0.0027388992 -0.0016543216 0.0001822600 -0.0036171262 -0.0026779243 0.0025915675 0.0034485302 -0.0225339743 -0.0588854751 0.0043436603 -0.0734100283 -0.0740205676 0.0349261575 -0.0008456633 0.0287436913 0.0041723616 0.0002371162 0.0006325482 -0.0002707881 -0.2931611007 0.1015704471 0.1730098099 0.0760248335 0.0959760886 -0.0342770108 0.0463107114 0.0225210974 -0.0241615434 -0.0067121628 0.0249745856 0.0047970856 0.3874259090 -0.0587042594 -0.2789206122 -0.0033949786 0.0351186406 0.0153529284 -0.0432065640 0.0885509794 -0.0292188259 0.0008090537 0.0599071890 -0.0004426545 0.0399618543 -0.0336116557 0.0229637741 -0.0155238451 -0.0190023252 -0.0058175017 0.3791118711 -0.0699235563 0.2786279561 -0.0325567638 -0.0561271316 -0.0261828159 -0.0102796880 -0.0259306482 -0.0050788601 -0.0020230401 -0.0018479598 -0.0007471462 -0.3056275169 0.0009894436 -0.1674753301 0.0377125076 -0.1117413680 0.0282427634 -0.0017906095 -0.0047650404 -0.0058754815 -0.0087256514 -0.0039092117 -0.0200050669 -0.0089484983 -0.0102383981 -0.0085889938 -0.0169388423 -0.0104041693 -0.0205822922 -0.0020363270 -0.0063663333 -0.0050348314 -0.0070735250 0.0111598036 0.0131456441 -0.0352675780 -0.0041744834 0.0121440879 0.0085207923 0.0001177603 0.0033882299 0.0019286024 0.0047590195 0.0001925102 0.0124155106 -0.0023778546 -0.0067731525 0.0045762068 -0.0005523287 -0.0022556880 -0.0014333376 -0.0016140122 -0.0007228721 -0.0030540362 0.0043097579 0.0021888083 -0.0057256744 -0.0070287117 -0.0024496540 -0.0006653319 0.0030961996 0.0001736802 0.0089049075 -0.0014968627 0.0045958655 0.0015779417 -0.0112145111 -0.0008082040 0.0293177402 -0.0038918510 0.0145395494 0.0079888441 0.0041129236 0.0011017007 0.0043675353 -0.0042096043 -0.0005220501 -0.0058878697 0.0082264096 0.0052977583 0.0082750560 -0.0128898370 -0.0083229793 -0.0004115121 -0.0018308973 -0.0000504738 -0.0174868550 0.0201199780 0.0125770205 -0.0345750634 -0.0313269560 0.0133417833 0.0052699032 0.0006542175 -0.0080106068 0.0100286441 0.0009307488 -0.0114151913 0.0004959887 -0.0027202747 -0.0036215546 -0.0010745973 0.0027932969 0.0055346977 -0.0055366597 -0.0089187999 -0.0031153806 0.0036001346 0.0185466030 0.0152580012 -0.0102327461 -0.0229733547 -0.0196354659 0.0024099046 0.0007946831 -0.0048184686 0.0012036308 0.0126756257 0.0086088798 -0.0127416527 0.0024603630 0.0085456685 0.0148918388 0.0090818991 -0.0145263678 -0.0005310392 0.0635946651 -0.0686115095 0.0113010983 0.0036426811 0.0121177241 0.0005276977 0.0005246049 0.0003447721 -0.0034454782 0.0005464102 0.0042548598 -0.0020559117 0.0010307269 0.0011241997 -0.0040216803 -0.0027091031 -0.0004479836 0.0003049304 0.0000677873 -0.0026243650 0.0012430237 -0.0070774226 0.0096702145 -0.0100730780 -0.0246330476 -0.0205659852 0.0089010561 -0.0041796690 -0.0288650533 0.0033865763 0.0002584182 0.0004160831 -0.0098993105 -0.0080976122 0.0023232396 -0.0089190648 -0.0099873146 0.0010138776 0.0456253235 0.0225136510 -0.0222944587 -0.0121749630 0.0089099302 -0.0040782968 -0.1711499456 -0.2476549134 -0.2173063662 0.0602072831 -0.0263631550 -0.0728317256 0.0282684867 0.1201163474 0.0945508478 -0.0002978810 -0.0089585612 -0.0003484262 -0.0015806363 -0.0046293455 0.0032193134 -0.0112971847 -0.0076678689 -0.0045009849 -0.0021977030 -0.0059063042 -0.0014467772 -0.0912180144 -0.0395721546 0.0157346904 0.0616901791 0.0227114004 -0.0150114504 -0.0026814430 0.0103809090 -0.0067506484 -0.0029322104 -0.0043353004 -0.0018176190 0.0035393576 0.0170471196 -0.0217307433 0.0277231068 0.0256037989 0.0209108431 0.0415233194 0.0234642453 0.0076750392 0.0188660573 -0.0164350996 0.0120390749 0.0161808711 -0.0082076995 -0.0098023465 -0.0076567975 0.0078851226 0.0106074697 -0.0070154046 0.0095511194 0.0077353768 -0.1772072399 -0.0384900074 0.0203896414 -0.1593274745 -0.0727544015 0.1034914997 0.1255958526 -0.0643119712 -0.1813096358 -0.0064946119 -0.0018878793 0.0026607693 -0.0025222854 -0.0012247255 0.0003640935 0.0027102140 0.0013620637 0.0008023489 0.0015256490 0.0007590719 0.0002403213 0.0014109382 -0.0005859855 -0.0023614514 -0.0014500970 -0.0004012889 0.0002521386 0.0007437995 0.0033096852 0.0006430400 0.0082757692 0.0036772328 -0.0058894460 -0.0000580636 0.0001589074 0.0008853225 0.0063145324 0.0021872986 -0.0014116320 0.0041837249 -0.0005940319 -0.0049716475 -0.0031484249 0.0021684311 -0.0002927408 0.0028350127 -0.0036813429 -0.0023699406 0.0025749728 -0.0011549531 0.0010832543 0.0042161684 -0.0008240201 0.0040333158 -0.0038560924 0.0019514893 -0.0013234939 0.0017183337 -0.0042963064 -0.0027931821 0.0178697427 -0.0061580858 0.0073385878 -0.0022014229 0.0019939393 0.0006637568 0.0186488259 -0.0160596597 -0.0013192404 0.0081387146 -0.0021728463 0.0096365256 -0.0000173753 -0.0000122957 -0.0002341665 -0.0005461708 -0.0003599574 -0.0002585149 0.0000714543 0.0000594542 0.0013445684 0.0006254313 -0.0013922062 -0.0019421366 -0.0010330393 -0.0061524732 -0.0002730485 -0.0071489192 -0.0065963385 0.0034736277 0.0000799507 0.0030398230 0.0003695028 -0.0001885487 0.0005285640 0.0001364130 -0.0305346297 0.0107386409 0.0178115738 0.0054089932 0.0077578495 -0.0024671057 0.0042172461 0.0019117802 -0.0022376502 -0.0005666089 0.0022619224 0.0004084472 0.0376430199 -0.0061021462 -0.0282072455 -0.0003629316 0.0035089492 0.0014712530 -0.0103792186 0.0162262503 -0.0067859502 0.0000176600 0.0114372985 -0.0001711956 0.0064335629 -0.0065668248 0.0037039688 -0.0022826238 -0.0041452664 -0.0006965081 0.0704341581 -0.0135358878 0.0506991538 -0.0002085069 -0.0029992788 -0.0019210122 -0.0011907935 -0.0048086289 -0.0005425150 -0.0003295479 -0.0002083002 -0.0001232133 -0.0564860010 0.0001821042 -0.0310423593 0.0061770360 -0.0181453798 0.0045651384 0.0350707944 0.0645619498 0.0786522293 0.1175592280 0.0779163557 0.2895708699 0.1022350430 0.1391803133 0.1314226454 0.2119262170 0.1239614278 0.2610339739 0.0464752322 0.0847312160 0.0672471953 0.1233554326 -0.1405208773 -0.1704122955 0.4512393974 0.1152933125 -0.1738091516 -0.1072754941 0.0135282030 -0.0969125822 -0.0074795479 0.0040283351 0.0034850383 0.0448653091 -0.0456760466 -0.0272783737 -0.0259019488 -0.0279901737 0.0090876816 -0.0203108063 -0.0165854865 0.0048430478 -0.0183154444 0.0447040315 0.0145490524 0.0321011326 0.0384466592 0.0160921953 0.0159824272 -0.0218895777 0.0060321983 0.0209413242 -0.0369797202 0.0098309662 0.0098260823 -0.0030842579 0.0033639717 -0.0699587920 -0.0284527814 -0.0324346700 -0.0173004815 -0.0100002350 -0.0113042145 0.0163566170 -0.0176821745 -0.0091809407 -0.0074510466 0.0112982828 0.0118739052 0.0126171022 -0.0190032498 -0.0154557359 -0.0012543459 -0.0035172603 -0.0035005152 -0.0011657346 -0.0036585439 0.0064518056 -0.0337684546 -0.0323820782 0.0098784594 0.0069672689 0.0003112291 -0.0116304007 0.0076057738 -0.0051506459 -0.0210006939 0.0000212331 -0.0027128234 -0.0021972434 -0.0011778917 0.0043086947 0.0070793002 -0.0040099914 -0.0081104214 -0.0009274053 0.0023156782 0.0206757352 0.0175562809 -0.0157537766 -0.0313352197 -0.0250246884 0.0070636725 -0.0010075694 -0.0123093796 0.0072365689 0.0539758852 0.0251622639 -0.0098233630 0.0009182551 0.0118810906 -0.0115293946 0.0201158732 -0.0298883284 0.1171840158 -0.2359867334 0.0436446652 0.0004919618 0.0006234267 0.0257592034 -0.0007638233 -0.0000204569 0.0013993535 -0.0020189659 0.0030650082 0.0036291750 0.0027639960 0.0011246383 0.0029491877 -0.0038426937 -0.0031300461 -0.0052477262 0.0043242136 0.0031014829 -0.0035278745 0.0317435151 -0.0116408737 -0.0359113878 -0.0133820157 -0.0015352498 -0.0160675837 0.0033662370 -0.0058302312 -0.0184484236 -0.0017863579 -0.0092187620 -0.0193595902 -0.0049540759 -0.0060136126 0.0024100262 -0.0089941304 -0.0123558073 0.0019982828 0.0584554451 0.0531941543 -0.0353887200 -0.0135517736 0.0098132972 0.0005854846 0.2743538984 0.0875132047 -0.0473919241 0.0978377188 0.0031830065 -0.0827363639 0.0155028283 0.0503277726 0.0419251353 0.0027861822 -0.0055952075 -0.0037180102 -0.0033645168 -0.0020836027 0.0042666906 -0.0053747071 -0.0028440060 0.0007003822 -0.0094657659 0.0027467705 0.0069410807 -0.1895348820 -0.0261380940 0.0987992245 0.0996283367 -0.0101653861 -0.0775969080 0.0086229871 0.0174703950 0.0057406167 0.0119740272 -0.0016777932 -0.0204209125 -0.0016377306 0.0087429472 -0.0054684430 0.0082862761 0.0173782187 0.0001757557 0.0106009206 0.0065148577 0.0039275550 0.0120065734 -0.0080592158 -0.0059577165 0.0504089602 -0.0037555366 -0.0301750241 0.0025842850 -0.0228986456 -0.0181406661 0.0105201051 -0.0227436093 -0.0082300102 -0.1819763058 -0.0679557161 0.0286307926 -0.1847707966 -0.0701646794 0.0854605882 0.0923634859 -0.0089082750 -0.1071434828 0.0093937415 0.0044707334 0.0025441275 -0.0005965450 -0.0014431833 -0.0023758719 -0.0000225643 -0.0019679784 -0.0029825933 -0.0013063861 0.0012170072 0.0032227076 -0.0028397030 -0.0002332162 0.0014974109 0.0041567663 -0.0004210310 -0.0036407565 -0.0103104330 -0.0086705244 -0.0046700048 -0.0079600480 0.0012703354 0.0003379360 0.0008930953 0.0001960015 0.0010452977 -0.0101409724 -0.0051536663 0.0002945274 -0.0026197246 0.0016281540 0.0008215724 -0.0013167520 0.0001048607 -0.0024301684 0.0011487490 -0.0030484534 -0.0041650192 0.0030315392 -0.0004807012 0.0034590299 0.0043596086 -0.0011044246 0.0036566867 -0.0061146231 0.0020461584 -0.0040299379 0.0069089944 -0.0122482541 -0.0061145449 0.0127407725 -0.0060494977 0.0040112696 -0.0017606412 0.0010060207 0.0006010268 0.0164345889 -0.0151621156 -0.0004676234 0.0087863938 -0.0010588889 0.0076989555 0.0003720535 0.0000658127 -0.0007506996 -0.0006699552 -0.0003321298 -0.0004947551 -0.0002432367 0.0002659959 0.0001479603 0.0005900809 -0.0007258120 -0.0011196611 0.0198823575 0.0338466844 -0.0060216388 0.0455915914 0.0294880600 -0.0225969476 -0.0062470967 -0.0145148905 0.0015718529 -0.0017621259 0.0028152764 0.0013412782 0.1230729573 -0.0473289137 -0.0726656357 -0.0231686283 -0.0239578582 0.0109480599 -0.0161575340 -0.0145198619 0.0068090039 0.0012097009 -0.0149321450 -0.0015350400 -0.1583220695 0.0184693265 0.1055496865 -0.0186231303 0.0545308199 0.0129904928 -0.0412939867 0.0476460485 -0.0260868170 -0.0079137776 0.0431347066 -0.0045444389 0.0141722579 -0.0207071942 0.0080677717 -0.0069155520 -0.0156965933 -0.0020687807 0.1857298568 -0.0399568187 0.1282949187 0.0361792789 0.0456442176 0.0131327797 0.0020986083 -0.0180494666 0.0015201433 0.0014044444 0.0019110845 0.0008024014 -0.1576082830 -0.0042196803 -0.0852252006 0.0154983065 -0.0372082963 0.0112995883 -0.0898843581 -0.0208435614 0.0106430631 -0.0386080933 -0.2132866566 -0.2359489835 0.1857959088 -0.0286244177 -0.1381023038 0.0809252116 0.1406700779 0.0310085410 -0.0854266491 -0.0131673990 0.0349421536 -0.1733928398 -0.1387095340 -0.0571516268 -0.1414641760 -0.1519337002 0.1309341041 -0.2729144025 -0.1987273619 0.0387716647 0.0167868130 -0.0117881815 -0.0083443824 -0.1272501391 0.1131814997 0.0739249086 0.0615536450 0.0669229522 -0.0212366447 0.0500130009 0.0390378005 -0.0137797777 0.0443820409 -0.1095166657 -0.0336184633 -0.0661014592 -0.0819301054 -0.0327515178 -0.0315437456 0.0498383069 -0.0109604976 -0.0395845064 0.0783303737 -0.0184979808 -0.0184365617 -0.0006947193 -0.0068748204 0.1357132051 0.0625001852 0.0636421577 0.0412434752 0.0228210702 0.0219957390 -0.0360380070 0.0399233021 0.0231110187 -0.0013527628 0.0065220815 -0.0054383666 0.0033393621 -0.0068984952 0.0014947314 -0.0004778386 -0.0017868796 0.0048201807 -0.0013232631 -0.0067028800 -0.0021336054 -0.0013886870 -0.0019686613 -0.0002645397 0.0007658389 -0.0000621793 -0.0014475127 -0.0023286436 -0.0021380859 0.0001205971 0.0005032917 -0.0003007637 -0.0009695810 -0.0003077040 -0.0000970607 -0.0001108699 0.0017080372 0.0014469415 0.0002327649 -0.0012318689 0.0010881241 0.0027096519 -0.0036449603 -0.0081809597 -0.0069161821 0.0028144509 -0.0020851015 -0.0066070055 0.0064805138 0.0239716037 0.0101198417 -0.0052862571 -0.0012574347 0.0018890361 -0.0018044651 0.0070531180 -0.0091802705 0.0506421365 -0.0843463540 -0.0015377218 -0.0018460112 -0.0005845688 0.0095102022 0.0002286946 0.0003592822 0.0004585394 0.0001876679 0.0018289159 0.0019689896 0.0002805640 -0.0006075222 -0.0006980220 -0.0009669188 -0.0006801195 -0.0010483627 0.0020532684 0.0014556916 -0.0012037627 0.0178240512 -0.0029203088 -0.0241571130 -0.0047087876 0.0010092331 -0.0057922881 -0.0030854130 -0.0013934207 0.0042125069 -0.0009598480 -0.0038693464 -0.0084742227 -0.0037535010 -0.0036513187 0.0013390978 0.0001929985 -0.0001632271 -0.0006270204 0.0077735620 0.0002488126 -0.0011619046 0.0202767296 -0.0152327748 -0.0050015184 0.0901973477 0.0246867577 -0.0220526831 0.0346883965 0.0014371656 -0.0286857773 0.0059731189 0.0198795675 0.0161753264 0.0009869666 -0.0025857772 -0.0013226977 -0.0012582128 -0.0005743112 0.0013991038 -0.0055120285 -0.0010652783 -0.0012966819 -0.0038562613 0.0014800138 0.0030799243 -0.0669908403 -0.0099943082 0.0340044701 0.0355025033 -0.0029121734 -0.0268611562 0.0035743612 0.0072333063 0.0021619813 0.0054976954 -0.0004813801 -0.0081221577 -0.0008915883 0.0017927738 -0.0007810560 0.0124423233 0.0116991133 0.0107045147 0.0183977047 0.0048543907 0.0014366389 0.0175219352 -0.0078020785 0.0044660786 0.0201840148 -0.0011416952 -0.0122418935 0.0020766021 -0.0100747914 -0.0096204233 0.0059232845 -0.0104917440 -0.0039885155 -0.0663101048 -0.0241667661 0.0099752377 -0.0666330522 -0.0259663300 0.0314604736 0.0344386648 -0.0043676910 -0.0405261030 -0.0217638821 -0.0094937041 -0.0054379924 0.0004472728 0.0023805548 0.0055009544 0.0013361014 0.0040316386 0.0064602877 0.0038174856 -0.0017899481 -0.0061663082 0.0061978594 0.0002114559 -0.0040534509 -0.0093241553 0.0008124674 0.0080260195 0.0205913708 0.0211045486 0.0091461809 0.0188912721 0.0037587287 -0.0073691659 -0.0017102443 0.0001128957 0.0008694394 0.0223863722 0.0109197410 -0.0012606362 0.0019681486 -0.0035176311 0.0008668807 0.0014444113 0.0006612951 0.0047485952 -0.0005659054 0.0040101505 0.0071293423 -0.0041291663 0.0004588538 -0.0047838910 -0.0062348201 0.0018698439 -0.0048921791 0.0087054964 -0.0024616979 0.0067027037 -0.0201477379 0.0285400886 0.0140968125 -0.0195842096 0.0095853321 -0.0068662914 0.0011862948 -0.0003199695 0.0006217554 -0.0179599675 0.0130052213 -0.0009314537 -0.0065197053 -0.0014152546 -0.0037472482 -0.0004317793 -0.0001735613 -0.0000651426 0.0005405007 0.0000770631 0.0004542048 0.0004571515 -0.0002148143 0.0003329612 -0.0001513233 -0.0000092352 -0.0000234824 -0.0453067706 -0.0794412004 0.0134112687 -0.1091674542 -0.0660830677 0.0546557467 0.0157296555 0.0336504034 -0.0042793336 0.0036988221 -0.0059890172 -0.0028342536 -0.2918605522 0.1117664638 0.1716862474 0.0504429048 0.0527759897 -0.0240644617 0.0365131633 0.0334642482 -0.0153087173 -0.0020005629 0.0356298723 0.0031811704 0.3710954304 -0.0442298456 -0.2492119197 0.0467020113 -0.1362053100 -0.0331408144 0.0777030746 -0.0986298600 0.0495300867 0.0169335081 -0.0895839903 0.0095846273 -0.0292630744 0.0425162613 -0.0166210113 0.0154110611 0.0303542837 0.0051845980 -0.3692976125 0.0806550004 -0.2547196730 -0.0661443599 -0.0855351823 -0.0233579356 -0.0031128035 0.0374264242 -0.0024366011 -0.0038311218 -0.0038824407 -0.0021605650 0.3141820594 0.0099192571 0.1697669584 -0.0318195176 0.0737851029 -0.0230441859 -0.0299049073 -0.0059663141 0.0055866717 -0.0111027958 -0.0703219475 -0.0734322414 0.0670007676 -0.0070557547 -0.0448246442 0.0326683647 0.0522292135 0.0148817156 -0.0283416768 -0.0029018496 0.0136337687 -0.0565633533 -0.0509583553 -0.0233241731 -0.0393392599 -0.0486999727 0.0411139411 -0.0960149910 -0.0674611429 0.0098416595 0.0302014319 -0.0123874141 -0.0148253516 -0.4216519807 0.1470447830 0.2158237108 0.0597356719 0.0405900465 -0.0239664576 0.0826381384 0.0012054289 -0.0497834454 0.0533139441 -0.1394389273 -0.0354198150 0.0983655222 0.1182284933 0.0423448053 0.0867579006 -0.0249726864 0.0526592647 0.0516103287 -0.0565388170 0.0245784814 0.0349776504 -0.0062683274 0.0141686179 -0.4723413969 0.0039355872 -0.2223893590 -0.0800248027 -0.0402126045 -0.0245995116 -0.0596874595 0.0616184051 0.0213253407 -0.0108713317 -0.0004332813 -0.0018957409 0.0138631959 -0.0172322243 -0.0098483341 0.0173909005 0.0178093169 0.0155428861 0.0153422489 -0.0003851299 0.0225337883 -0.0466146845 -0.0415497408 0.0188254059 0.0091338956 0.0031112992 -0.0109456515 0.0128745835 -0.0013500629 -0.0230648512 0.0001343157 -0.0015318428 -0.0022811356 -0.0003916153 0.0056996478 0.0091355769 -0.0095954474 -0.0157517842 -0.0061874587 0.0009242657 0.0202415183 0.0224560320 -0.0161214580 -0.0386532013 -0.0281754770 -0.0049718095 0.0085663089 0.0193680463 0.0060372350 0.0163473603 0.0144423360 0.0136128525 0.0046646393 0.0012609743 -0.0119105895 -0.0028130217 0.0007497150 -0.0596755966 0.0377486241 0.0646713813 0.0019458044 0.0011691311 -0.0006852098 0.0015508136 0.0011664789 0.0002057947 -0.0000837814 -0.0000818630 -0.0002517740 -0.0023768498 -0.0026565250 -0.0027235290 -0.0008493945 0.0002573138 0.0036252593 -0.0009072216 -0.0010209237 -0.0016109618 0.0029039024 -0.0000077801 -0.0075672089 -0.0090084238 -0.0052406772 -0.0140951540 -0.0052257982 0.0011256270 0.0119343300 0.0051190343 0.0057651351 0.0094793673 0.0043592767 0.0025102023 -0.0000056069 -0.0107213275 -0.0126204336 0.0003346730 0.0639264592 0.0490888303 -0.0359130442 -0.0351132696 0.0234560265 -0.0079102724 -0.0077130944 0.0023494661 0.0068869200 -0.0038354391 0.0011873026 0.0046390525 -0.0013721270 -0.0049932815 -0.0039165745 0.0014381476 0.0002107675 -0.0003557981 -0.0003717242 0.0014645651 -0.0030556936 -0.0075838544 0.0007631048 -0.0035623006 -0.0093474445 0.0056820066 0.0092162292 0.0085258715 0.0015590287 -0.0039487161 -0.0044941180 0.0001232464 0.0030833769 0.0047471036 -0.0100638584 0.0088651356 0.0007271304 0.0002358804 0.0152358772 -0.0031244567 -0.0071627286 0.0085185249 0.0143024971 0.0000141650 0.0258812845 0.0374580895 0.0019343677 -0.0014448064 0.0164856218 -0.0060023427 0.0166984462 0.0421897794 0.0014713733 -0.0320860473 0.0152312879 -0.0220930057 -0.0454219045 0.0366211946 -0.0358322523 -0.0150026689 0.0079637957 0.0028324015 -0.0009946232 0.0084469151 0.0034187852 -0.0041936770 -0.0059863700 0.0023502547 0.0072818756 -0.0327041155 -0.0116658964 0.0038139010 0.0021649836 0.0039631677 0.0055522984 0.0042948748 0.0059446803 0.0072676097 0.0030109818 -0.0051500615 -0.0118212040 0.0059429806 -0.0019025540 -0.0075557401 -0.0142684014 0.0010504456 0.0106316152 0.0136745261 0.0093047741 0.0100860146 0.0011067812 0.0033573473 0.0146083938 -0.0024771665 0.0002135601 0.0005363000 0.0549375764 0.0269326047 0.0036233079 0.0490161126 -0.0082236968 -0.0377527731 -0.0022531227 -0.0008330803 -0.0051525614 0.0057107801 -0.0084395332 -0.0083422238 0.0062638065 0.0018977811 0.0124202122 0.0069357955 0.0007218268 0.0108772070 -0.0161917680 0.0044977265 -0.0103642671 0.0036945768 -0.0062210257 -0.0092060460 0.0037844806 -0.0071045834 -0.0132818791 -0.0022851780 0.0006519656 -0.0006952242 0.0599002838 -0.0489557526 -0.0100326676 0.0661840043 -0.0111450262 0.0499995652 -0.0008022490 -0.0002519409 0.0002647206 0.0016171181 0.0004894219 0.0011127863 -0.0010253251 0.0005148797 -0.0007244388 0.0008544375 -0.0006905162 -0.0007485677 -0.0348281002 -0.0162413270 0.0178370184 -0.1060876486 0.0294665817 0.0651475903 0.0279708365 0.0011228792 -0.0157359476 -0.0076297329 -0.0102588052 0.0031800880 -0.1206394266 0.0396732681 0.0703430144 0.0245228942 0.0286505497 -0.0110810042 0.0025875429 0.0063480802 -0.0016680248 0.0138739199 0.0348190757 -0.0058510082 0.1477766739 -0.0262182515 -0.0991945313 0.0886799524 -0.2430221391 -0.0690809418 -0.1199933048 0.0045489693 -0.0690032720 -0.0311519273 0.0247194042 -0.0186877972 0.0025415650 -0.0055651818 0.0017403114 0.0020405459 -0.0402472851 0.0053309648 0.1489264079 -0.0230561247 0.1014061987 0.1714598538 0.2121170498 0.0768559938 0.0293358432 -0.0101035595 0.0168912746 -0.0056431369 0.0142517086 -0.0038840183 -0.1309066724 0.0029879204 -0.0702291985 0.0167655735 -0.0443152996 0.0119804036 0.0032541563 -0.0006404421 -0.0024140337 -0.0013117733 0.0073591845 0.0022550823 -0.0123175042 0.0003878517 0.0063245731 -0.0076625587 -0.0103759406 -0.0049196206 0.0022663344 -0.0009181130 -0.0039362295 -0.0021030799 0.0105038288 0.0077771777 0.0009274315 -0.0025703864 -0.0014456111 0.0174559169 0.0073044394 0.0095018512 -0.0008009491 0.0012065692 0.0005283778 0.0154816178 -0.0062164770 -0.0081495300 -0.0023532944 -0.0022188784 0.0008757768 -0.0033838422 -0.0007429376 0.0018981007 -0.0019968416 0.0057628581 0.0011830367 -0.0028487283 -0.0034621965 -0.0013237021 -0.0031428861 0.0001146135 -0.0019130837 -0.0018558409 0.0012394237 -0.0009006174 -0.0013127144 0.0008436804 -0.0004869728 0.0165144772 -0.0009328392 0.0076948705 0.0021245225 0.0011367015 0.0009752602 0.0020998903 -0.0022030817 -0.0008871087 0.0017580731 -0.0051655777 -0.0035418426 -0.0045718970 0.0073482124 0.0048307640 0.0015513303 0.0023343176 0.0014770820 -0.0006735510 -0.0034023928 -0.0065798774 0.0135023354 0.0122806635 -0.0051142291 -0.0026866877 -0.0007494674 0.0034818998 -0.0051958688 -0.0019764239 0.0060398544 -0.0000367596 0.0006887542 0.0009880313 0.0008296051 -0.0011199532 -0.0031455253 0.0032300021 0.0046496604 0.0010159574 -0.0009393000 -0.0067090133 -0.0065879572 0.0037914440 0.0094213459 0.0072287065 0.0003363927 -0.0006626138 -0.0008892704 0.0023366082 0.0021883975 -0.0004926586 -0.0027255394 -0.0006944800 -0.0003879882 0.0025225993 0.0006380107 0.0019797678 0.0122638581 -0.0038299176 -0.0177668640 -0.0021573529 -0.0016126511 -0.0010447614 0.0003815228 0.0000875063 -0.0002169090 0.0008970380 0.0005496229 0.0001538336 -0.0005020256 -0.0004054063 -0.0011432523 0.0010428620 0.0004701613 0.0001143862 0.0002009303 0.0002365673 0.0005794132 0.0034423136 0.0012031677 -0.0059127949 0.0049425870 0.0024963063 0.0064520967 -0.0037501414 0.0016893820 0.0089372988 -0.0014348689 -0.0013700009 -0.0023115662 -0.0020198255 -0.0008337734 0.0001129447 0.0033521130 0.0040532125 -0.0004687426 -0.0155831223 -0.0134080441 0.0095891161 0.0017004412 -0.0010672225 0.0006587068 -0.0081914443 -0.0031551072 0.0021305057 -0.0003175930 0.0018809240 0.0025088656 -0.0006626064 -0.0005301509 -0.0007814096 0.0100144162 -0.0038035958 -0.0108812555 0.0012724225 -0.0156996240 0.0402621367 -0.0144121184 0.0000040809 -0.0034730646 -0.0989484941 0.0584323305 0.0948248315 0.0044123029 0.0002119331 -0.0026075862 -0.0016396195 -0.0000902620 0.0011960047 -0.0663351843 0.0905424270 -0.0929747200 -0.0070458348 -0.0023687149 -0.1597511320 0.0464579038 0.0765303020 -0.1178712743 0.0253886864 0.0192640639 0.0325255610 0.0506407269 0.0030838065 -0.0000218642 0.0402136539 -0.0157028508 0.0130362261 0.4443683023 0.0133328250 -0.3377003847 0.1488154093 -0.2292729401 -0.4540149089 0.3707744328 -0.3748889586 -0.1574298669 -0.0020483633 -0.0010830156 -0.0000101863 0.0034277769 -0.0010996807 -0.0020844951 -0.0105289654 0.0119468293 0.0126241961 0.0006612666 0.0004546327 0.0005090499 -0.0003423832 -0.0003214726 -0.0002506713 0.0001530112 -0.0001176475 -0.0002994610 0.0000068658 0.0002485129 0.0004354674 -0.0002732925 -0.0001056972 0.0000362073 0.0004266160 -0.0001042245 -0.0004743022 -0.0011141343 -0.0005524913 -0.0005520168 -0.0000448116 0.0004364507 -0.0006270766 0.0000353201 0.0000147588 0.0000449650 -0.0009264079 -0.0002788998 -0.0001861376 -0.0000951309 0.0001115142 -0.0001987461 -0.0000172884 0.0000635062 0.0001185498 -0.0002663575 0.0005014234 0.0002784674 -0.0001659421 -0.0003092469 -0.0006911739 -0.0002710989 -0.0001413421 -0.0005750799 0.0008346105 -0.0002337246 0.0005728132 0.0009761893 -0.0008871779 -0.0002316012 -0.0011512094 -0.0004602382 0.0008872563 0.0005054609 0.0000551855 0.0012107923 -0.0038855643 0.0038028961 0.0009219505 -0.0042313412 0.0010095907 -0.0033320481 0.0000405885 -0.0000120893 -0.0000723398 -0.0000638352 -0.0000334582 -0.0000078191 -0.0002179467 -0.0000289700 -0.0011713774 -0.0001266025 0.0001558873 0.0002402692 0.0015832283 0.0012317044 -0.0007283671 0.0041007072 -0.0004137764 -0.0024250811 -0.0010262466 -0.0003144905 0.0005446404 0.0001798626 0.0003921178 -0.0000546753 0.0056605074 -0.0020355480 -0.0033423066 -0.0010208380 -0.0010549821 0.0004738018 -0.0003257562 -0.0004574190 0.0001562473 -0.0003591657 -0.0013921121 0.0001210741 -0.0070794080 0.0010674864 0.0047954630 -0.0031435209 0.0088845907 0.0024445005 0.0041330261 0.0007269270 0.0023269157 0.0011458019 -0.0000288884 0.0006926015 0.0000078832 -0.0001693050 0.0000074757 -0.0001891716 0.0013169027 -0.0002452769 -0.0027640763 0.0001892819 -0.0019726255 -0.0058798497 -0.0071685925 -0.0026619129 -0.0011355252 0.0000296011 -0.0006441467 0.0003181625 -0.0005828938 0.0002118244 0.0022028579 -0.0002375383 0.0011417375 -0.0005236680 0.0015955141 -0.0003936854 0.0026671089 0.0006914503 -0.0008349580 0.0016484478 0.0070238818 0.0089409463 -0.0058888449 0.0001405769 0.0031337588 -0.0019217446 -0.0041530625 -0.0007146408 0.0017208717 -0.0003227422 -0.0015223938 0.0101544206 0.0092060882 0.0059658368 0.0041398416 0.0096272602 -0.0078096338 0.0070549065 0.0028646811 0.0022267786 -0.0072964852 -0.0056400854 0.0023454958 0.0657445185 -0.0131609198 -0.0312285069 -0.0070274049 0.0022463231 0.0035713540 -0.0095752240 0.0077142238 0.0070800172 -0.0060826182 0.0141961087 0.0059644019 -0.0166881122 -0.0222636090 -0.0057762680 -0.0123140091 0.0109189408 -0.0074829444 -0.0063359755 0.0139774280 -0.0031277776 -0.0040325728 -0.0066606331 -0.0022457848 0.0635397107 0.0064661403 0.0312388026 0.0184371772 0.0080802413 0.0018555659 0.0109240300 -0.0109979718 -0.0017186309 -0.0158343108 0.0562522226 0.0383677024 0.0433804993 -0.0735451204 -0.0494765721 -0.0261561941 -0.0339981947 -0.0189024041 -0.0119973073 0.1013012800 0.1329166585 -0.2899002454 -0.2625545367 0.1121393543 0.0597916651 0.0189384313 -0.0741100443 0.1098073480 0.0424114685 -0.1260213797 0.0009984406 -0.0156297542 -0.0233529022 -0.0184779441 0.0231027012 0.0674864646 -0.0676235606 -0.1000780682 -0.0253473164 0.0113442841 0.1343371643 0.1470898767 -0.0862594206 -0.2139250047 -0.1643044276 -0.0089674441 0.0143772962 0.0220515060 -0.0391335983 -0.0271348401 0.0193288733 0.0590380570 0.0143789647 0.0057862439 -0.0416011645 -0.0211558422 -0.0308291327 -0.2788389188 0.1713325233 0.3076575992 0.0439514726 0.0352310541 0.0199689201 -0.0021373429 -0.0013789169 0.0009572131 -0.0151670085 -0.0103615823 -0.0007813480 0.0025708199 0.0069343316 0.0221786201 -0.0188419590 -0.0131806627 -0.0001224218 -0.0057774547 -0.0076186640 -0.0155407001 -0.0745582857 -0.0147915117 0.1239219208 -0.0745712952 -0.0760355568 -0.1093367487 0.0520877022 -0.0082512804 -0.1718340110 0.0297376254 0.0301919767 0.0479904407 0.0390899685 0.0264590759 -0.0077609149 -0.0649665880 -0.0777938077 0.0104810339 0.2983575365 0.2511770466 -0.1991702609 -0.0012062039 -0.0002127056 -0.0040267482 -0.0112462860 0.0123428780 0.0234717309 -0.0092546442 -0.0020530801 0.0048342657 -0.0038095497 -0.0135399823 -0.0089459520 -0.0003440747 0.0030446221 -0.0026582502 0.0026076050 -0.0111976482 0.0245247104 0.0258462540 0.0008015643 0.0130132273 -0.0074242155 0.0038279131 0.0070333929 0.0205993102 0.0058288841 -0.0070825489 -0.0117468022 -0.0012808708 0.0063821575 -0.0434248549 0.0591750811 -0.0645158302 -0.0116800244 -0.0021214504 -0.1010211354 0.0283003093 0.0556001414 -0.0737143914 -0.0653439404 -0.0254336806 -0.0848802298 -0.1155316534 -0.0231031661 -0.0004489896 -0.0809255107 0.0312207042 -0.0599696987 0.0312158725 0.0015538589 -0.0274226868 0.0106426139 -0.0131073628 -0.0325016363 0.0282356535 -0.0281770061 -0.0116268091 0.0252937995 0.0073713249 -0.0027552756 0.0250613332 0.0111269841 -0.0139725249 -0.0169566295 0.0060356174 0.0207287723 0.0095867426 0.0006333131 -0.0080493326 0.0035977332 0.0020029112 -0.0001685575 -0.0046499034 -0.0015973079 -0.0000086276 -0.0022132297 -0.0003193782 0.0011545778 0.0001776359 0.0020301209 0.0036696465 0.0029553502 0.0004803896 -0.0002534171 0.0079073912 0.0030649330 0.0012551667 -0.0009626345 -0.0109841958 0.0035383541 0.0006692273 -0.0001164189 -0.0012841021 -0.0208783267 -0.0096891456 -0.0013332851 -0.0235106351 0.0047919679 0.0195280038 -0.0007810105 0.0011911709 0.0008841779 0.0012341235 -0.0010690827 0.0000785160 0.0009746834 -0.0006166021 0.0003070449 0.0007139281 0.0003586121 0.0018267312 -0.0008685729 0.0010577281 0.0003639773 -0.0078430179 0.0052974228 0.0040270397 -0.0009275207 0.0003236288 -0.0026191058 0.0000032728 -0.0000636978 0.0000850602 0.0066663988 -0.0055560993 -0.0004981558 0.0080169187 -0.0043005940 0.0103424153 -0.0000402950 0.0000800008 0.0007514474 0.0002380623 0.0001266542 -0.0002480993 -0.0001360779 0.0000363610 -0.0004158280 -0.0001649044 0.0003066753 0.0002590201 0.0019150339 -0.0059126829 -0.0020598825 0.0116186706 -0.0123324550 -0.0082842565 -0.0043042237 0.0030267150 0.0028378642 0.0026060011 0.0016287714 -0.0013294377 -0.0002248507 0.0018335431 0.0005920385 -0.0026804239 -0.0047865602 0.0010392352 0.0017680164 0.0025222142 -0.0004597549 -0.0029690550 -0.0038042707 0.0014989042 0.0029625994 0.0021483036 -0.0023861010 -0.0125596404 0.0323761519 0.0097292242 0.0149219146 -0.0065791144 0.0089151305 0.0056791294 -0.0096445880 0.0033324966 -0.0012891939 0.0031901621 -0.0008462577 0.0012203678 0.0057825608 0.0001027803 -0.0308060783 0.0067241543 -0.0211862206 -0.0219709957 -0.0285386876 -0.0094814300 -0.0030148472 0.0034694152 -0.0018136001 -0.0004800010 -0.0020132648 -0.0001874222 0.0271392440 0.0009562822 0.0147575787 -0.0037760741 0.0065848986 -0.0025064831 0.0054597295 -0.0024701746 -0.0067607198 -0.0043549052 0.0036472657 -0.0170364145 -0.0336166560 0.0038260310 0.0191631941 -0.0244538865 -0.0347580888 -0.0074168665 0.0070396797 -0.0043502935 -0.0092329550 -0.0084354346 0.0338536536 0.0312285082 -0.0145576032 0.0105018647 -0.0053493102 0.0201840325 -0.0034140759 0.0198412421 -0.0003419046 0.0016319798 0.0003746967 0.0141745768 -0.0054381985 -0.0074650269 -0.0017598229 -0.0018846617 0.0006257593 -0.0030184173 -0.0007671582 0.0018237064 -0.0012290016 0.0048538151 0.0008332290 -0.0038284119 -0.0052453229 -0.0016955997 -0.0049238632 0.0000596857 -0.0027910088 -0.0025947460 0.0016600178 -0.0012748422 -0.0020511211 0.0010794806 -0.0007915646 0.0242874968 -0.0015039168 0.0115482721 0.0037932994 0.0018519345 0.0012160103 0.0022236298 -0.0023286336 -0.0004730049 -0.0000928967 -0.0018978616 -0.0016306775 -0.0014445328 0.0023289430 0.0016052173 0.0005063401 0.0007553081 0.0017476411 -0.0028691179 0.0128000941 0.0128970210 -0.0315105871 -0.0281860739 0.0128108121 0.0068375081 0.0026351027 -0.0077937630 0.0098546620 0.0011708406 -0.0147880801 -0.0001148111 -0.0016471837 -0.0021450890 -0.0012120635 0.0032212994 0.0068423457 -0.0065034860 -0.0109203444 -0.0041232169 -0.0005732729 0.0123670375 0.0162501905 -0.0109006989 -0.0257987374 -0.0191042547 -0.0020420942 0.0036852139 0.0077217632 0.0024063238 0.0116527646 0.0089570463 0.0059301153 0.0022669248 0.0019633475 -0.0039848910 -0.0008485742 -0.0015928933 -0.0227601301 0.0127897699 0.0279066147 0.0019544435 0.0013713143 0.0013672878 0.0003984972 0.0003662856 0.0003915596 -0.0006756021 -0.0003682369 0.0002565449 -0.0005567646 -0.0004307251 -0.0003308261 -0.0004925169 -0.0004095166 0.0001864887 -0.0003516515 -0.0004259732 -0.0009332181 -0.0008861805 -0.0004472651 0.0005979528 -0.0034187309 -0.0036837696 -0.0053909244 0.0000582499 0.0003098037 -0.0024937516 0.0014215179 0.0014196559 0.0022028810 -0.0004375624 -0.0001787176 0.0005477096 -0.0054779731 -0.0068288197 0.0009285850 0.0270199238 0.0243370896 -0.0204644211 0.0018791285 -0.0014004090 0.0005462116 -0.0036808317 -0.0001456506 0.0010598622 0.0028407394 0.0056812887 0.0035597888 -0.0005681466 -0.0002123455 -0.0031003131 0.0049601346 -0.0054521902 0.0106315707 -0.0158316326 0.0591390502 -0.1305234872 -0.0194747559 -0.0004966153 -0.0124158285 -0.0263953333 0.0163016304 0.0217893126 -0.0003951957 -0.0012836688 -0.0008269569 0.0010138238 0.0002008345 -0.0001302188 0.2282531084 -0.3294572893 0.3503034919 0.0772687412 0.0086660272 0.5667042114 -0.1458430807 -0.3129887772 0.3903736180 0.0433410120 0.0181603176 0.0584683098 0.0652769330 0.0190160545 -0.0020841758 0.0533049665 -0.0213083712 0.0458609629 0.1291493355 -0.0007841432 -0.0825259425 0.0379683444 -0.0715202428 -0.1203413051 0.1051639135 -0.0985022144 -0.0445791598 -0.0072851728 -0.0015115746 0.0031935117 -0.0042710593 -0.0000169151 0.0030109469 -0.0037393227 0.0065674247 0.0035851035 0.0000484310 0.0003591300 0.0009608283 -0.0002506290 -0.0002482283 -0.0002483873 0.0003237752 0.0000415335 -0.0002385667 -0.0000497118 0.0000910763 0.0001548135 -0.0002687764 -0.0002321616 -0.0001971502 0.0001883125 -0.0001034300 -0.0002986496 -0.0016705508 -0.0008289450 -0.0006565323 -0.0008350525 -0.0004827471 0.0011589085 0.0000832111 0.0000351598 0.0000277616 0.0009111962 0.0005782467 0.0000639859 0.0021362419 0.0001532436 -0.0022370275 -0.0000235111 0.0005228333 0.0008973816 -0.0003922541 0.0007862042 0.0007107097 -0.0008985146 -0.0004861169 -0.0024549428 -0.0003339588 0.0000393737 -0.0004819818 0.0013766637 -0.0003211981 0.0009906695 0.0021703084 -0.0020731218 0.0002499693 0.0051816232 -0.0023204700 0.0069032872 -0.0005608019 -0.0013264890 -0.0052538379 -0.0056085464 0.0034026258 0.0015695300 -0.0088021029 0.0020202529 -0.0066266071 0.0000008640 -0.0000055272 0.0000349202 -0.0000648896 -0.0000501369 -0.0000771857 0.0011076603 0.0000293604 0.0041535558 -0.0003564053 0.0008026351 0.0004602360 0.0012321569 0.0006748659 -0.0006147566 0.0028194659 -0.0006295142 -0.0017577833 -0.0008453676 -0.0001433946 0.0004697225 0.0001558570 0.0003768343 -0.0000467263 0.0032669112 -0.0012128163 -0.0019762308 -0.0006175965 -0.0005235489 0.0002690244 -0.0000954330 -0.0002045351 0.0000796302 -0.0002336890 -0.0010930212 0.0000578478 -0.0036910480 0.0005941120 0.0022544061 -0.0024383027 0.0071271429 0.0019340777 0.0051575686 0.0015859899 0.0028662100 0.0022112296 0.0004885563 0.0012705125 0.0000265650 -0.0005269553 -0.0000061825 -0.0001758190 0.0017800162 -0.0002682921 -0.0004626757 -0.0004173308 0.0001663832 -0.0077533912 -0.0096192822 -0.0036019723 -0.0015652293 -0.0001395736 -0.0008869380 0.0003549934 -0.0011298031 0.0002720166 0.0000604431 -0.0002486367 -0.0000629203 -0.0012447199 0.0029748512 -0.0008532811 0.0014198913 -0.0004824556 -0.0006194574 -0.0004036491 0.0035636982 0.0021005381 -0.0031956656 0.0025350053 0.0047432037 -0.0011752183 -0.0025950750 -0.0013530081 0.0012878670 0.0019484320 0.0000920028 -0.0052176846 -0.0129577812 -0.0145310862 -0.0009415254 -0.0188155894 0.0138867823 0.0115749852 0.0175208801 -0.0102677587 0.0538801841 0.0700805122 -0.0148870939 -0.2477076915 0.0122938714 0.1141200510 0.0310161737 -0.0446407701 -0.0210485949 0.0383146205 -0.0746748349 -0.0255779468 0.0283910608 -0.0323413310 -0.0167458660 -0.0293766292 -0.0163121309 -0.0144418578 -0.0572499104 -0.0632742062 -0.0247672777 -0.0431259547 -0.0400415707 -0.0208055604 -0.0238290757 0.0862855779 -0.0101667155 0.2120236720 -0.0739691795 0.0920408765 0.0204041260 0.0047616291 0.0091397766 -0.0218968592 0.0152282751 0.0103454105 0.0003991462 -0.0022224505 -0.0032601782 -0.0016311293 0.0022847184 0.0034906950 0.0009323724 0.0012857389 0.0035680408 0.0012970779 0.0062420135 0.0087262134 -0.0221853740 -0.0195632127 0.0092605102 0.0045872376 0.0018380484 -0.0050910947 0.0044109282 -0.0016762468 -0.0099364893 0.0002548072 -0.0004183354 -0.0010343440 -0.0000366083 0.0024347716 0.0037327039 -0.0038854598 -0.0070329919 -0.0035337917 -0.0010752245 0.0075731894 0.0112092089 -0.0091853366 -0.0212733499 -0.0156139387 -0.0030748247 0.0044648318 0.0104827561 0.0071782081 0.0167204178 0.0112895078 0.0056663878 0.0023214137 0.0011174651 -0.0040391057 -0.0007853552 0.0004279960 -0.0194540722 0.0123912785 0.0210216038 0.0000803302 -0.0001543480 -0.0002290731 0.0004622979 0.0003414140 0.0003658508 0.0000011881 -0.0000476227 -0.0000371274 -0.0007750911 -0.0006378645 -0.0012907897 0.0001145478 0.0003211276 0.0007186677 -0.0002356520 -0.0002516825 -0.0003248192 0.0019414723 0.0000337555 -0.0044734401 0.0003976868 -0.0015907693 -0.0008621501 -0.0016820508 0.0002407467 0.0050623081 0.0008455663 0.0011863275 0.0018035630 0.0003794401 0.0003439955 0.0004373343 -0.0031436606 -0.0039377972 0.0002275453 0.0193006361 0.0140979442 -0.0129498110 0.0656415478 -0.0141515211 0.0983344292 0.0010704144 0.0005546143 -0.0004724464 0.0003579604 0.0002755145 0.0000870175 0.0000554948 -0.0000284751 0.0000788839 -0.0004254349 0.0001911385 -0.0004845725 0.0008098344 -0.0021960429 0.0050763017 0.0005555259 0.0002174484 0.0008022491 0.0017126136 -0.0009446028 -0.0012959788 -0.0008397294 -0.0001149010 0.0004164254 0.0004332638 0.0000389680 -0.0003016671 -0.0096467099 0.0120406620 -0.0141870818 -0.0037520822 -0.0002663943 -0.0208666528 0.0061328275 0.0114334346 -0.0153146567 0.0003706185 0.0010215837 -0.0008718922 -0.0020061659 -0.0045908444 -0.0008855069 -0.0001770412 0.0006015023 -0.0051275126 -0.0078132475 0.0000596440 0.0051935467 -0.0021204546 0.0038285240 0.0071027940 -0.0066926537 0.0060069909 0.0026984299 -0.0007475214 -0.0002693760 -0.0002588542 -0.0005737004 -0.0007083676 0.0002139516 0.0007794611 -0.0004512172 -0.0008767962 -0.0706424616 -0.0016533732 0.0750950640 -0.0182920716 -0.0094005624 -0.0029937959 0.0353464010 0.0148111598 -0.0021695767 0.0087195416 -0.0056596580 -0.0182844363 -0.0054452740 -0.0186400948 -0.0299845670 -0.0229360901 -0.0031732753 0.0054785720 -0.0962921768 -0.0572668507 -0.0181603733 -0.0524309579 0.0163203593 0.0802794309 -0.0014708229 0.0014672189 0.0020167088 0.2014754386 0.0965986729 0.0215939824 0.2502584676 -0.0192792484 -0.2221862094 0.0131893617 -0.0104894630 -0.0019811984 -0.0443747261 0.0286955871 -0.0095230168 -0.0128056083 -0.0097856742 -0.0383830963 0.0130264802 -0.0276467416 -0.0353785156 0.0266722273 -0.0086786323 0.0085859312 0.1993751106 -0.1900970430 -0.0756471983 0.1404387173 -0.0306001608 0.1524187298 0.0019440904 0.0018719701 0.0031213970 -0.2565256380 0.2218172107 0.0776338454 -0.3646408946 0.0940613486 -0.2959081885 -0.0019013554 -0.0003914203 0.0031741624 -0.0006153970 -0.0005826905 -0.0012716426 0.0037064129 -0.0014150438 0.0049026612 -0.0009770028 0.0001606545 -0.0005177354 -0.0080596079 0.0559687111 0.0130262525 -0.0464985314 0.0790029484 0.0341945142 0.0189140207 -0.0248574577 -0.0138335135 -0.0174232372 -0.0122103085 0.0089312575 0.0707212736 -0.0377889333 -0.0461734737 0.0260977977 0.0404466661 -0.0107059185 -0.0106123059 -0.0216931307 0.0033065058 0.0157992101 0.0159683700 -0.0082168517 -0.0771059134 -0.0055780034 0.0551449617 0.0536633954 -0.1294144052 -0.0428336584 0.0619011610 0.0628810632 0.0304525021 0.0203844499 0.0556380739 0.0121513923 0.0044612790 -0.0265343410 0.0036342740 -0.0100996792 0.0184078007 -0.0074861683 0.0933949611 -0.0361840230 0.0716394507 -0.0867052647 -0.0990324389 -0.0431704128 -0.0256908868 -0.0179374885 -0.0140578257 0.0137339826 -0.0165343824 0.0089863063 -0.0836446372 -0.0125338756 -0.0485243639 -0.0082614312 0.0403169604 -0.0065336951 -0.0001724931 -0.0001395243 0.0000717005 -0.0004400417 -0.0006521496 -0.0016023404 -0.0000500252 0.0005525668 0.0007021128 0.0001733754 -0.0000450228 0.0003840621 -0.0001005723 -0.0001314208 -0.0001066766 -0.0018426133 0.0002964368 0.0007597143 -0.0011586444 -0.0002953120 0.0005549783 -0.0011772647 -0.0017062627 0.0012299296 -0.0007297297 0.0018564518 0.0008066961 0.0279603502 -0.0088694627 -0.0151623924 -0.0034783680 -0.0020762271 0.0015070466 -0.0064827416 0.0002947538 0.0040086720 -0.0033992172 0.0081705519 0.0000674105 -0.0018703123 -0.0050481352 -0.0021129919 -0.0058058130 0.0020063324 -0.0035221322 -0.0019416722 0.0042809387 -0.0009859759 -0.0038173527 -0.0014811466 -0.0002552148 0.0335107307 0.0002151464 0.0157829070 0.0000999313 0.0017413157 0.0043074307 0.0012392702 -0.0009202850 -0.0007826030 0.0123342875 -0.0496027770 -0.0360681765 -0.0389355352 0.0647386662 0.0437477329 0.0164884318 0.0261188653 0.0244072486 0.0597181377 0.0486446164 0.0341175086 -0.1719240674 -0.1394515492 0.0874791207 0.0228430266 0.0129718565 -0.0198568618 -0.0554480013 -0.1377758186 -0.0997047646 0.0036584970 0.0208152637 0.0260172633 0.0395749249 0.0403264838 -0.0139101796 -0.0026542398 -0.0443857547 -0.0544553251 -0.0200369438 0.0139785101 0.0474339257 -0.1083389387 -0.2122535047 -0.1355823652 -0.0797966506 0.1229285246 0.3267475713 0.2311440396 0.5103254768 0.2684465457 0.0468867661 0.0559929773 0.0532127331 -0.0380907473 0.0141550251 0.0490659608 -0.0642620275 0.0422451726 0.0686222807 -0.0511083647 -0.0551305105 -0.0417677411 0.0023434424 0.0027868216 0.0053349484 0.0165483390 0.0082241791 -0.0140031220 -0.0050169333 -0.0073834711 -0.0312652491 0.0307825405 0.0200356209 -0.0054498986 0.0012852396 0.0070642155 0.0236091208 0.0742925110 0.0100499613 -0.1382482550 0.1245336796 0.1025707414 0.1794138515 -0.0661550536 0.0139525741 0.2310175467 -0.0303006767 -0.0275902900 -0.0311184976 -0.0463953320 -0.0287666292 0.0168033624 0.0027917760 -0.0014548725 -0.0025608536 0.0830937623 0.0609512630 -0.0616850392 0.0019882611 -0.0072845359 -0.0119567048 -0.0012588322 -0.0030218212 -0.0015810063 0.0009236082 0.0016261562 0.0030010555 -0.0001859186 -0.0001763540 -0.0003541248 0.0014103886 0.0000401189 -0.0002842174 0.0011569926 -0.0055224731 0.0121685518 -0.0328785052 -0.0021902814 -0.0164098601 0.0063673178 -0.0034320975 -0.0054423651 -0.0015479435 -0.0007036078 0.0001486120 0.0009959168 0.0007385737 -0.0007415389 -0.0201866401 0.0348227766 -0.0329403027 -0.0060698878 -0.0005641192 -0.0591135286 0.0128320406 0.0312764467 -0.0367188579 0.0864703418 0.0389962974 0.1081918029 0.1482682538 0.0375667357 0.0035498681 0.1066459457 -0.0418336714 0.0791077705 -0.0323812078 0.0000060191 0.0239449823 -0.0091882125 0.0160825963 0.0285730538 -0.0250712569 0.0256917217 0.0113943300 -0.0020947790 0.0001128586 0.0010919448 -0.0012622834 -0.0028576676 0.0001842136 0.0040120252 -0.0032549358 -0.0030481872 0.0015140475 0.0009824048 0.0001389646 -0.0012578334 -0.0010003704 -0.0008658388 -0.0000618395 -0.0008295008 -0.0005534004 -0.0006695043 0.0015183037 0.0025059801 -0.0008898183 -0.0001410258 0.0003270620 0.0018913051 -0.0001617236 -0.0016955232 0.0063572649 0.0039064903 0.0005799673 0.0020968899 0.0034039882 -0.0067152349 0.0016853222 0.0000989377 0.0015128680 -0.0061349934 -0.0044356440 -0.0006227798 -0.0051616016 -0.0004970109 0.0048468666 0.0003134904 -0.0001290440 0.0005520952 0.0054216666 -0.0010754288 0.0055406082 -0.0007047581 0.0026710664 0.0046829238 -0.0061514498 0.0046830862 0.0003631945 0.0013361713 -0.0008830463 0.0008086575 -0.0410000124 0.0416423866 0.0174262128 -0.0341518948 0.0104033679 -0.0264851885 -0.0004654378 0.0005312694 0.0011794086 0.0278111543 -0.0262783295 -0.0146969892 0.0373414809 -0.0127114079 0.0301609986 0.0000929604 0.0002147489 -0.0000164830 -0.0012778760 -0.0005767826 -0.0012732498 -0.0002724699 0.0001202124 -0.0005838451 0.0008195863 -0.0010814702 -0.0011608874 0.0015327092 0.0001632672 -0.0009191742 0.0064647135 -0.0029261964 -0.0040484717 -0.0020345635 0.0004370102 0.0012387487 0.0007010122 0.0006135321 -0.0003332680 0.0059429065 -0.0016174730 -0.0035577757 0.0002185185 0.0002000499 -0.0002548784 0.0004259706 0.0000112268 -0.0001864962 -0.0008890983 -0.0025142549 0.0003517042 -0.0076721869 0.0018041395 0.0046421777 -0.0059377983 0.0163394211 0.0047131061 0.0056096946 0.0006505641 0.0032604603 0.0035057065 -0.0008010739 0.0018062753 -0.0004820512 0.0000984260 -0.0003100710 0.0001232393 0.0019141022 -0.0001159841 -0.0028436600 0.0004277497 -0.0021885768 -0.0072153492 -0.0089931717 -0.0032481200 -0.0012097113 0.0001443590 -0.0006380997 -0.0000986332 -0.0013477783 0.0000334414 -0.0005504275 0.0000886322 -0.0006604272 -0.0024478543 0.0048562613 -0.0017979509 0.0008643977 -0.0000104164 -0.0022265398 -0.0022021467 0.0095447925 0.0090570814 -0.0089395925 0.0026317060 0.0057783055 0.0059623186 0.0002654449 0.0038694089 0.0047275608 0.0025251887 -0.0038131526 -0.0154163823 0.0029966645 0.0014433021 -0.0122814212 -0.0044974385 0.0107343852 -0.0023009554 -0.0114560802 0.0106881183 -0.0204985731 -0.0370631818 0.0070744916 0.0817471370 0.0070483003 -0.0347082186 -0.0123481625 0.0256092446 0.0088143730 -0.0113413251 0.0383155479 0.0079084151 -0.0040460540 0.0108621858 0.0029691749 0.0094509455 -0.0035581428 0.0067714947 0.0252550932 0.0139351693 0.0122726046 0.0111498461 0.0010276490 0.0082574656 0.0289614223 -0.0222313360 -0.0008063205 -0.1177546167 0.0169353697 -0.0608173872 -0.0071627050 -0.0021408989 -0.0038226990 0.0055831881 -0.0027722516 -0.0025683868 -0.0003126074 0.0003939124 0.0006856701 0.0005515048 -0.0005306848 -0.0008349102 0.0000638054 0.0001150997 -0.0004986696 0.0080945242 0.0000344805 -0.0010652054 -0.0078234466 -0.0052801697 0.0051293308 -0.0004269623 0.0001237986 0.0008649126 -0.0104231573 -0.0170691596 -0.0062091205 0.0004215532 0.0032804535 0.0043623282 0.0053261796 0.0036076061 -0.0047125579 0.0023620773 -0.0008342791 -0.0043790928 -0.0009342874 -0.0024958926 -0.0019959616 -0.0078242732 -0.0129028077 -0.0068809065 -0.0082832926 0.0130305885 0.0359271797 0.0239401508 0.0553772160 0.0265965113 0.0013167059 0.0059457799 0.0066359956 -0.0019503707 0.0025197994 0.0053105429 0.0071915679 -0.0059998460 -0.0065531309 -0.0059387673 -0.0065633917 -0.0049702459 -0.0004371747 -0.0002322943 0.0003212020 0.0019650119 0.0009814258 -0.0020905032 0.0003809923 -0.0001741195 -0.0021465855 0.0033695902 0.0020852427 -0.0013491507 0.0003630644 0.0010828774 0.0031658540 0.0061905129 0.0007044838 -0.0103612355 0.0133295865 0.0144473172 0.0213689629 -0.0054355480 0.0008234725 0.0216249310 -0.0037041844 -0.0037574343 -0.0041607359 -0.0042536759 -0.0024784675 0.0011907333 0.0018892124 0.0017759440 -0.0005907181 -0.0002431354 -0.0000484297 0.0007937345 -0.0221139484 0.0657070823 0.0803824469 -0.0010311375 -0.0015055845 -0.0005174885 0.0010165129 0.0002974546 -0.0001963316 0.0001605691 0.0006291642 0.0002985599 -0.0012988865 -0.0000506900 -0.0003937684 0.0003555301 0.0007650779 -0.0013385549 0.0141157118 0.0015898403 0.0078017855 -0.0008177193 0.0006199139 0.0011270316 -0.0004898427 -0.0002570541 0.0000417111 0.0002703564 0.0000062866 -0.0001997206 0.0010453243 -0.0062812547 0.0031580107 -0.0011780911 0.0001529902 0.0094365626 -0.0008686923 -0.0046853159 0.0046050019 -0.0351307614 -0.0187711941 -0.0415329166 -0.0604006512 -0.0259332247 -0.0041232147 -0.0461135895 0.0191550904 -0.0402465183 0.0057657626 0.0002613014 -0.0050726043 0.0021773928 -0.0036295160 -0.0055437468 0.0036324726 -0.0052780547 -0.0023355725 -0.0011241069 -0.0001915530 0.0008965768 -0.0011123773 -0.0001193635 0.0006149911 -0.0001767824 0.0005438266 0.0006250817 0.0256792233 -0.0153454381 -0.0567069658 0.0059834715 0.0037840415 0.0019202152 -0.0255874499 -0.0057433029 0.0106805313 -0.0022798379 0.0085175524 0.0187006340 0.0164161930 0.0153564872 0.0149107617 0.0097330345 0.0015170397 -0.0016791009 0.1404258496 0.0825490782 0.0329514570 0.1021941528 -0.0090598178 -0.1027805336 0.0009358887 -0.0017984328 -0.0015338492 -0.1612223397 -0.0845245570 -0.0312070397 -0.2016383442 0.0088071362 0.1772149302 -0.0144164884 0.0123729718 0.0057014686 -0.0390913737 0.0084235843 -0.0407282938 0.0025744910 -0.0276107322 -0.0533145188 0.0501083676 -0.0382052574 -0.0011923721 -0.0035703458 0.0043945242 0.0017027090 0.3597373768 -0.3420088922 -0.1496700565 0.3105459665 -0.1001803973 0.2506783995 0.0012635433 0.0030676741 0.0026974537 -0.2266935610 0.2241175997 0.1212491683 -0.3242076676 0.1051262738 -0.2561273818 0.0013662510 0.0004311367 -0.0019512381 -0.0010530810 0.0000045202 -0.0000526894 0.0026873811 -0.0015514064 0.0025151557 -0.0055257775 0.0041316557 0.0042522515 0.0002680479 -0.0270456135 -0.0044999577 0.0104658976 -0.0319941670 -0.0089605937 -0.0075356180 0.0097288792 0.0055589939 0.0087959904 0.0057631437 -0.0045439985 -0.0357231072 0.0166232750 0.0227703973 -0.0124667308 -0.0202926532 0.0048644916 0.0033085983 0.0120143591 -0.0003232545 -0.0044814513 -0.0053391911 0.0022186024 0.0571435539 -0.0006118147 -0.0400977218 -0.0151416435 0.0369428211 0.0123362733 -0.0272813321 -0.0195619698 -0.0141745431 -0.0246791231 -0.0135977056 -0.0125867325 -0.0005818103 0.0042762320 -0.0003951428 0.0045042912 -0.0071698442 0.0032924660 -0.0230582862 0.0062023203 -0.0176684349 0.0309049201 0.0317358959 0.0150672693 0.0049975669 0.0088199698 0.0023349098 0.0006345484 0.0096630028 -0.0004029555 0.0675057915 0.0037598492 0.0387138319 0.0196258867 -0.0391734440 0.0138649406 0.0000760630 0.0001721939 -0.0001790104 0.0002903994 0.0015777107 0.0029705034 -0.0002877324 0.0007214618 0.0006560170 0.0017766596 0.0008500233 0.0012872450 0.0006151879 0.0009517365 0.0001012338 -0.0013853377 -0.0016551965 -0.0019809070 0.0024046936 -0.0017685430 0.0004282028 0.0003284643 0.0003092893 0.0006746443 -0.0040518660 -0.0047779568 0.0019266422 0.0331402812 -0.0052635389 -0.0163997141 -0.0045197131 0.0026196221 0.0024770155 -0.0064353551 0.0067997492 0.0039561750 -0.0023453986 0.0082042495 -0.0000970834 0.0021928386 -0.0027273270 0.0002890415 0.0010451339 0.0016019032 0.0001732150 0.0007587622 0.0013373511 0.0008502120 0.0024225108 -0.0031525316 -0.0004895656 -0.0005758641 0.0016330116 -0.0013178668 -0.0033470246 0.0000980957 0.0026224120 0.0012084036 -0.0005274625 -0.0009262768 0.0106850340 -0.0471460456 -0.0343810830 -0.0360471868 0.0587983955 0.0396952696 0.0202152310 0.0276932773 0.0246370117 -0.0469094726 0.0244522218 0.0213543883 -0.0048575941 -0.0106462777 -0.0049079241 0.0130178427 0.0059395510 -0.0134052585 0.0607265391 0.0798815768 0.0082434412 -0.0030126870 -0.0194651218 -0.0244182011 -0.0264891500 -0.0112372959 0.0321297884 -0.0180211158 -0.0129267870 0.0112993026 -0.0040540061 0.0211604932 0.0342940559 0.0196550087 0.0226004727 0.0043684052 0.0352675168 -0.0541952133 -0.1485722912 -0.1071722854 -0.2218559616 -0.1102844910 0.0073498710 -0.0259462712 -0.0311526456 0.0021035109 -0.0116889048 -0.0190520640 -0.0747137573 0.0620288607 0.0751032909 0.0204698031 0.0256250754 0.0222876297 0.0073338918 0.0052070501 -0.0005754427 -0.0073188826 -0.0024852393 0.0137377611 -0.0078727086 -0.0056051892 -0.0032275968 -0.0117072017 -0.0065558950 0.0099710915 -0.0015013363 -0.0047472599 -0.0148846725 -0.0007213445 0.0023497105 -0.0076576362 -0.0457957246 -0.0630304187 -0.0837103067 0.0025803016 -0.0000351172 -0.0377921149 0.0132585755 0.0121819528 0.0111340184 -0.0018254008 -0.0033644192 0.0010907136 -0.0118285047 -0.0119897157 0.0037519261 0.0315518018 0.0209133391 -0.0313780797 -0.0019570672 0.0069140767 0.0079634411 0.0085863792 0.0085531519 -0.0010319694 -0.0050674411 0.0002560557 0.0031867759 -0.0006312888 -0.0031565783 -0.0013998515 0.0086634093 0.0002738322 0.0021080884 -0.0006150540 -0.0069422966 0.0154021420 -0.1149713960 -0.0106837560 -0.0594514438 0.0094203988 -0.0061203792 -0.0103709756 -0.0006053894 0.0005532843 0.0009082498 0.0004248168 0.0005114271 0.0001425182 -0.0255006473 0.0508988346 -0.0428338651 -0.0009563121 -0.0007207004 -0.0823209668 0.0181556100 0.0411717698 -0.0554335640 0.3012242099 0.1574434446 0.3577345038 0.4930578024 0.1574565953 0.0195329579 0.3761713587 -0.1502105489 0.2870179288 -0.0572408968 -0.0019288554 0.0487332713 -0.0192078872 0.0319130040 0.0527537737 -0.0403331959 0.0510635791 0.0229105901 0.0028478054 0.0001368743 -0.0057829899 0.0036326667 -0.0025245431 -0.0021789842 0.0056032750 -0.0060073036 -0.0089332203 0.0042247439 -0.0031016631 -0.0103405834 0.0016428915 0.0005935883 0.0002963917 -0.0053516730 -0.0006813797 0.0023110508 -0.0003933444 0.0016481881 0.0038655883 0.0031791033 0.0028964364 0.0026252697 0.0020977730 0.0001302644 -0.0007872838 0.0270181486 0.0176283534 0.0053958035 0.0232079767 -0.0067513184 -0.0184866042 -0.0016507490 -0.0008829006 -0.0005274238 -0.0311180485 -0.0172501529 -0.0060002242 -0.0362994314 0.0012964728 0.0318713690 -0.0040929941 0.0038418658 0.0020415721 -0.0033065463 0.0014999720 -0.0032343669 0.0003451683 -0.0052199590 -0.0096115147 0.0051363999 -0.0045357438 -0.0010662528 0.0019532170 -0.0003515807 0.0022279885 0.0432049297 -0.0406685228 -0.0174093230 0.0441838224 -0.0182874901 0.0419067479 -0.0025639239 0.0035914458 0.0037507116 -0.0276140342 0.0275429435 0.0132963910 -0.0514730771 0.0162281170 -0.0408261194 0.0006210660 0.0000978514 -0.0017776030 0.0009544441 0.0005783782 0.0013473110 0.0009908592 -0.0002568535 0.0011933204 0.0005608686 -0.0019050514 -0.0026718053 0.0015447953 -0.0045859758 -0.0016270786 0.0052312606 -0.0070183080 -0.0036716384 -0.0025097056 0.0017408308 0.0016772505 0.0019600621 0.0016877410 -0.0009656962 -0.0034941725 0.0019294509 0.0023656907 -0.0029930437 -0.0042974346 0.0011683770 0.0005129513 0.0022185406 0.0000377296 -0.0010085459 -0.0025490478 0.0004040345 0.0071383501 0.0006074594 -0.0056742343 -0.0056561434 0.0153932209 0.0046552102 -0.0022274043 -0.0013757097 -0.0010406348 -0.0018995726 -0.0011122922 -0.0009596651 -0.0003269883 0.0001060827 -0.0002417840 0.0006834420 -0.0004389512 0.0004513610 0.0007270694 -0.0000816347 0.0004283198 0.0020064688 0.0014203553 0.0010386555 0.0001586639 0.0010683387 0.0000389685 0.0001832734 0.0005721972 0.0000530488 0.0060990186 0.0006243833 0.0034714909 0.0014902813 -0.0027138073 0.0010596582 -0.0006384024 -0.0009840181 0.0018061310 -0.0027184808 -0.0089115423 -0.0183931390 0.0028395655 -0.0033532979 -0.0029605436 -0.0082144446 -0.0022597994 -0.0071031632 -0.0033907810 -0.0051870419 -0.0005903162 0.0035352107 0.0042167874 0.0068853959 -0.0214394408 0.0063894830 0.0049298366 -0.0056911348 -0.0036037709 -0.0068730902 0.0427538378 0.0130557702 -0.0035740584 -0.1400556563 0.0292328203 0.0739055654 0.0120564210 -0.0039912584 -0.0095438460 0.0207168056 -0.0252721750 -0.0120778177 0.0082039747 0.0032127710 -0.0056213045 -0.0016962637 -0.0024666446 -0.0021884337 -0.0279395336 -0.0332150654 -0.0109671072 -0.0198396301 -0.0160132407 -0.0110362537 -0.0223678232 0.0423191507 -0.0032107980 0.1077390089 -0.0324517021 0.0506085373 0.0043524121 0.0000886004 0.0015800361 -0.0048119091 0.0034574867 0.0027963655 -0.0016170219 0.0057121262 0.0040051354 0.0047641301 -0.0078008828 -0.0049669117 -0.0021047059 -0.0030340762 -0.0024230938 0.0020157613 -0.0036198291 -0.0000852464 0.0030197255 0.0031102042 -0.0007198325 -0.0014548543 -0.0004883988 0.0016037353 -0.0027597996 -0.0013603828 0.0021456104 0.0002323883 0.0007976900 0.0009580298 0.0007543848 -0.0001802590 -0.0021949023 0.0016582182 0.0013524118 0.0004587042 0.0005172025 -0.0018358586 -0.0032305599 0.0010614444 0.0031299724 0.0024984410 -0.0002066105 0.0003154030 0.0044401343 -0.0042006717 0.0056503918 -0.0030852980 -0.0009739175 0.0002936038 0.0004492131 0.0002842986 -0.0003202233 -0.0008638694 0.0029869524 -0.0027227465 -0.0043882049 0.0013668318 0.0009982315 0.0002677294 -0.0005422814 -0.0003995432 -0.0002695099 -0.0002258971 -0.0001966991 -0.0003829078 0.0006888217 0.0008849499 0.0017511048 -0.0006990949 -0.0005720922 -0.0002367850 -0.0001688184 -0.0001270129 -0.0001986273 -0.0040272679 -0.0004809823 0.0079928908 -0.0027916627 -0.0017092020 -0.0034679953 0.0032278803 -0.0002060193 -0.0099966266 0.0011323621 0.0007983711 0.0018509739 0.0016159389 0.0011962013 -0.0008235384 0.0006141781 0.0008744322 -0.0002282765 -0.0019594413 -0.0034318008 0.0034744221 0.0307953812 -0.0345361615 -0.0059390472 -0.0002744194 0.0001237180 0.0006869517 -0.0004091147 -0.0003594754 -0.0001484157 -0.0000697032 -0.0001835377 -0.0001036565 0.0002848502 0.0000494234 0.0001538381 -0.0001267503 0.0000604176 -0.0002681632 -0.0017803377 -0.0004497061 -0.0011002088 -0.0001939040 0.0000356536 0.0000250105 0.0006362147 0.0001738051 -0.0002139005 -0.0003565776 -0.0000386376 0.0001959129 0.0005740862 -0.0003253399 0.0007233616 0.0003524964 -0.0000299048 0.0007650171 -0.0003502227 -0.0001951237 0.0004408329 0.0044074310 0.0038748230 0.0036646867 0.0062408419 0.0058119222 0.0012590792 0.0067070017 -0.0030227222 0.0061547821 0.0004926688 -0.0000889047 -0.0001536749 -0.0000746342 0.0000693372 -0.0001887420 0.0006490485 -0.0001959426 -0.0000947113 0.0008502113 0.0002727936 0.0001295651 0.0007509593 0.0005051271 -0.0004063823 -0.0004038603 0.0000456082 0.0004348659 -0.0494726016 -0.0760826897 -0.0849440839 -0.0198210893 -0.0082138774 -0.0006555314 -0.0362407668 0.0090616295 0.0459580359 0.0119447919 0.0286867957 0.0472967434 0.0649067714 0.0271200668 -0.0034387361 -0.0102648831 -0.0007472364 0.0061055608 0.4421878225 0.2581131607 0.1123800957 0.3686952898 -0.0060039681 -0.2997537164 0.0004981964 -0.0053120167 -0.0033084460 -0.2806878678 -0.1703654436 -0.0985984650 -0.3489664749 -0.0026863134 0.2991424475 0.0115224775 -0.0099538142 -0.0039842428 0.0042651129 0.0050311397 0.0158907949 -0.0053089661 0.0101241571 0.0132840650 -0.0189916004 0.0088336090 -0.0107942709 0.0102024847 -0.0047963494 0.0022853336 -0.1060481451 0.1003177092 0.0459119213 -0.1012224970 0.0374071789 -0.0697293043 -0.0001246785 -0.0008845626 -0.0005484758 0.0245870523 -0.0345432963 -0.0320860394 0.0354219289 -0.0182278155 0.0250946446 0.0019922846 0.0011204963 -0.0016057647 -0.0065842846 -0.0012513141 -0.0031337161 -0.0000482058 0.0002902300 0.0005476544 0.0023503243 -0.0018824413 -0.0021790270 -0.0245545933 0.0239953938 0.0155697366 -0.0186150588 0.0293358209 0.0135539341 0.0000725804 -0.0102172072 -0.0011019228 -0.0025142332 -0.0122995304 0.0003844230 0.0818614008 -0.0314407647 -0.0507009726 0.0426463652 0.0422236355 -0.0207790333 -0.0002831133 -0.0044169405 -0.0006584775 0.0063046487 0.0049115152 -0.0033946333 -0.0342883031 0.0043028726 0.0243731436 0.0165233362 -0.0310213213 -0.0120740736 0.0209274720 0.0289503005 0.0098020045 0.0214720370 0.0260029401 0.0115320520 -0.0018446210 -0.0110849323 -0.0009277420 -0.0031039225 0.0065078175 -0.0023138915 0.0693495330 -0.0186954354 0.0508262668 -0.0235182021 -0.0247262773 -0.0120828299 -0.0075097956 -0.0089557903 -0.0039407029 0.0035604646 -0.0127956891 0.0029814312 -0.0762645156 -0.0029205038 -0.0438119506 -0.0189388342 0.0462673806 -0.0136346623 0.0000836021 -0.0000036534 -0.0001386664 -0.0000848034 0.0002857682 0.0000903742 -0.0005295804 -0.0004968002 -0.0003279887 -0.0005008718 -0.0003665877 -0.0005135679 -0.0000550507 -0.0000923143 -0.0002039214 0.0006801053 0.0011626192 0.0008507332 0.0005033865 0.0001318559 -0.0006195120 0.0007688645 0.0001769501 0.0007443770 0.0036831087 0.0020746954 -0.0001328494 -0.0070944915 0.0011960865 0.0016337568 0.0010555388 -0.0007257125 -0.0005748854 -0.0001664105 -0.0010474368 0.0003533653 -0.0029562611 0.0014431915 -0.0032228540 0.0028754021 0.0013240678 -0.0016391395 -0.0006224512 -0.0000780271 -0.0000584750 0.0003972235 0.0014611041 0.0005994907 -0.0009157511 -0.0004559912 0.0005250864 0.0075957777 0.0006268258 0.0014969775 -0.0089881339 -0.0006448749 0.0075041189 -0.0053319476 0.0064937355 0.0010661939 0.0242667706 -0.1081580311 -0.0794736538 -0.0807341052 0.1366330145 0.0935066803 0.0468898914 0.0648940745 0.0577551288 -0.0778426703 0.0396251950 0.0217224151 -0.0293877491 -0.0338889862 0.0040589118 0.0244976004 0.0119825838 -0.0240038254 0.0808797977 0.0856917351 -0.0106896046 -0.0064240684 -0.0273610952 -0.0306488176 -0.0319591893 -0.0067143180 0.0481363789 -0.0255112795 -0.0262434506 0.0050408051 -0.0092545607 0.0321785427 0.0567100379 0.0124691550 0.0046863791 -0.0085719430 0.0413115224 -0.0570694190 -0.1651159264 -0.1071058764 -0.2127988481 -0.1045165510 -0.0024933498 -0.0292584237 -0.0308837285 0.0146856472 0.0044726913 0.0005868239 -0.0183857709 0.0311665105 0.0554465804 -0.0139833046 -0.0004417868 0.0137749389 0.0180292505 0.0123253315 0.0002384647 -0.0011773466 0.0044121649 0.0239760501 -0.0175385758 -0.0216615164 -0.0359405886 0.0023437016 0.0045619565 0.0113837831 0.0040340994 0.0008708781 -0.0074307978 0.0819227199 0.0160646523 -0.1640258830 0.0203749898 0.0163486616 0.0218097199 -0.0555330680 -0.0000069560 0.1505282838 -0.0156336907 -0.0198676840 -0.0436800659 -0.0618851476 -0.0394532898 0.0151418840 -0.0156373152 -0.0165197708 0.0039509948 0.0460960075 0.0281409596 -0.0510329843 0.0029439030 -0.0029928151 -0.0039304925 0.0061859955 -0.0026010350 -0.0174674704 0.0105195117 0.0091807887 0.0027301573 0.0021718913 0.0058718649 0.0027756533 -0.0113170904 -0.0022704707 -0.0048041975 0.0030521351 0.0026359966 -0.0036667790 0.1083734382 0.0169122764 0.0584162451 -0.0011821381 0.0034279654 0.0061719473 -0.0153814853 -0.0043788789 0.0049771324 0.0086951580 0.0007085596 -0.0048565597 0.0081353117 -0.0207065285 0.0139624720 -0.0080511914 0.0012114113 0.0258618001 -0.0080086847 -0.0146246393 0.0297236945 -0.2908603000 -0.1869576933 -0.3118025545 -0.4292763832 -0.1931781302 -0.0314756301 -0.3702228461 0.1528801888 -0.2833139368 0.0233295922 0.0040031188 -0.0269359683 0.0140167233 -0.0213890140 -0.0287813772 0.0107749234 -0.0290862567 -0.0131006638 -0.0210509825 -0.0066532238 -0.0003432839 -0.0199556536 -0.0108249728 0.0109425781 0.0080246731 0.0011267819 -0.0065661309 -0.0042916385 -0.0049322333 -0.0056989411 -0.0004547738 -0.0007002439 0.0003691862 -0.0027595074 0.0010509411 0.0035494932 0.0009521023 0.0019184993 0.0031954774 0.0037700870 0.0014429397 -0.0004253693 -0.0004781170 -0.0001297797 0.0000106140 0.0294448519 0.0214819454 0.0059408276 0.0274857227 -0.0047743540 -0.0184973653 -0.0019035249 -0.0007548552 0.0002690716 -0.0191934267 -0.0121684272 -0.0066478706 -0.0184062756 -0.0022202989 0.0173975562 0.0030541082 -0.0033714697 -0.0002926358 0.0004573367 0.0000731555 0.0022150655 -0.0025901246 0.0047330828 0.0052266552 -0.0023980461 0.0017113855 -0.0004734199 -0.0006245007 -0.0004871931 -0.0016726565 -0.0167458652 0.0257736839 0.0064687142 -0.0282447307 0.0154845806 -0.0284049324 0.0051403421 -0.0041627869 -0.0016226430 0.0098380988 -0.0106031334 -0.0060224852 0.0259701835 -0.0108980199 0.0212375271 0.0006179549 0.0000525392 -0.0019970885 0.0007201920 0.0004142097 0.0011901657 -0.0016571519 0.0001196732 -0.0035180895 -0.0015946838 0.0026452425 0.0041321528 -0.0023792163 0.0018961682 0.0013856369 0.0014589594 0.0005664288 -0.0006363834 -0.0004877672 0.0000255899 0.0003562821 -0.0002678521 -0.0013294136 0.0000475818 0.0085027382 -0.0022202766 -0.0055759583 0.0058670154 0.0065415238 -0.0031434976 0.0012263258 -0.0007651363 -0.0008078795 -0.0003927484 -0.0005234342 0.0002128253 -0.0098963504 0.0017933031 0.0058991915 -0.0020441623 0.0054482629 0.0015984726 0.0014262101 -0.0006763767 0.0008228805 -0.0002696423 -0.0002661794 -0.0002987726 -0.0005772276 0.0002563415 -0.0002422613 0.0001553847 0.0002773496 0.0000630077 -0.0043585826 0.0005926246 -0.0039219938 -0.0001428343 -0.0002698417 -0.0001797139 -0.0002189539 0.0003547347 -0.0000286443 0.0001917818 0.0001821773 0.0001090551 0.0031988020 0.0000328865 0.0011339354 0.0003853423 0.0001048515 -0.0001011128 -0.0027544241 -0.0001382425 0.0038912777 0.0029744008 -0.0074400462 0.0013861851 0.0200311965 0.0125123067 0.0053301863 0.0141459667 0.0138751895 0.0098812068 -0.0033937261 0.0005023759 0.0068864091 -0.0065032381 -0.0244375863 -0.0164211809 0.0100819660 -0.0028342059 -0.0003201274 -0.0067530416 0.0073930934 -0.0118993013 -0.0006046904 -0.0004175746 0.0000659402 -0.0030287940 0.0008504695 0.0013324879 0.0004319492 0.0001658422 -0.0001595637 0.0014491653 0.0000101965 -0.0007091552 0.0007617279 -0.0009714810 0.0005221423 -0.0006672528 -0.0007112039 0.0003140970 -0.0006903890 -0.0004995081 -0.0002412718 -0.0006119926 -0.0002362383 -0.0003929186 -0.0004879018 0.0007789789 -0.0002554650 0.0022199115 -0.0005891735 0.0014716239 0.0017754151 -0.0001221629 -0.0015424901 0.0008124806 -0.0014278657 -0.0001094022 -0.0067403869 0.0214383351 0.0156505814 0.0172087738 -0.0282903335 -0.0197887380 -0.0063324880 -0.0090007298 -0.0032994406 -0.1512799244 0.0024735435 0.0040180352 -0.0767924994 -0.0832759290 0.0091405110 0.0111891708 -0.0110949176 -0.0352664984 0.0716356584 0.0308770028 -0.0410960046 -0.0003750301 0.0059251646 0.0083220836 -0.0154735911 0.0006508065 0.0268576528 -0.0312331201 -0.0191242946 0.0214933235 0.0671741485 0.0902913604 0.0081618051 0.0006212157 -0.0076532763 -0.0002266793 0.0208812173 -0.0265227798 -0.0785735393 -0.0899130544 -0.1468564646 -0.0523139745 -0.1302962265 -0.0076280693 0.0293052265 0.1036074627 0.0634010367 0.0531437026 0.4896359943 -0.3209718190 -0.3598436018 -0.0774437742 -0.0685756750 -0.0474862340 0.0031396839 0.0021629596 0.0002518846 0.0153608779 0.0101858403 -0.0037046903 -0.0017196560 -0.0083430218 -0.0301862842 0.0422659102 0.0227388575 -0.0288954847 0.0106748517 0.0175795526 0.0426907452 0.0880191994 0.0113170902 -0.1516755878 0.1831047418 0.1920944790 0.3036533132 -0.0802316546 0.0116388702 0.2733020233 -0.0874188322 -0.0900855701 -0.1314258910 -0.1259338292 -0.0806996718 0.0257666589 -0.0517598123 -0.0583898074 -0.0002811510 0.0516268178 0.0074566450 -0.0352023727 0.0000093878 -0.0001147162 0.0005752812 -0.0166576668 -0.0051275421 0.0299948509 0.0009639022 -0.0086297781 -0.0092489116 -0.0031400689 -0.0059643617 -0.0031008118 0.0027142021 0.0031881726 0.0014907841 -0.0007526443 -0.0019354596 0.0014625771 -0.0164044545 -0.0048128156 -0.0089944864 0.0002421030 -0.0016924899 -0.0019113233 0.0160082312 0.0040447466 -0.0059263775 -0.0095119859 -0.0034513779 0.0038324826 -0.0034544364 0.0071759879 -0.0060600588 0.0021730487 -0.0015624645 -0.0041530459 0.0028972220 0.0064407048 -0.0107143240 0.0456081024 0.0365582749 0.0405820533 0.0568864503 0.0393647224 0.0080896777 0.0581561716 -0.0258139596 0.0430713355 -0.0035753439 -0.0018970701 0.0048929149 -0.0038067393 0.0064711927 0.0077474705 -0.0024533076 0.0083437009 0.0039800980 0.0208448767 0.0072079342 0.0154124956 0.0059235648 0.0250170886 -0.0016832113 -0.0206599992 0.0106764774 0.0287214243 0.0002112188 0.0002096310 0.0002924947 0.0010038358 0.0001120815 -0.0002083483 -0.0003294714 -0.0004255884 0.0000023162 -0.0003949051 -0.0001907676 0.0002505538 0.0003426245 0.0001437703 -0.0000024929 -0.0001423569 0.0000092753 -0.0000607725 -0.0013810209 0.0003049037 -0.0013188192 -0.0021320043 -0.0008565458 0.0019357955 -0.0006394655 -0.0001873858 -0.0001700258 -0.0002459192 -0.0002768594 -0.0002500818 -0.0001442976 -0.0000360653 -0.0000737295 0.0000995062 0.0001027339 0.0000451874 -0.0003391391 0.0002534334 -0.0001051052 0.0004617074 -0.0004831586 -0.0002046605 0.0005327413 -0.0005360788 -0.0002034529 -0.0001461608 0.0002449595 -0.0001210047 -0.0008853467 -0.0007680117 0.0007582861 0.0039548626 -0.0016469547 0.0042066241 -0.0019273268 0.0014420980 0.0002052691 0.0009044946 -0.0008667365 -0.0003669263 -0.0048687898 0.0006932325 -0.0028939083 0.0002127265 -0.0000986515 -0.0004752647 0.0004166185 0.0003654779 0.0006070080 0.0005709176 -0.0000470861 0.0015394118 0.0008086829 -0.0011071567 -0.0016221626 0.0001469394 -0.0001924766 -0.0000737452 -0.0013038541 0.0005306825 0.0007213463 0.0005010061 -0.0001329610 -0.0002769498 -0.0001218200 0.0001229956 0.0000873337 -0.0025495240 0.0006251858 0.0013078201 -0.0011830973 -0.0011613227 0.0005230553 -0.0002883970 -0.0000315036 0.0002205105 0.0001713947 0.0005787701 -0.0000501101 0.0025874853 -0.0007060180 -0.0020390336 0.0012153952 -0.0035478037 -0.0010949918 0.0001709508 0.0005469817 0.0000510340 0.0006905785 0.0003419247 0.0003917806 -0.0001289192 -0.0001905965 -0.0000821788 0.0000138487 0.0000991508 0.0000049110 0.0023136572 -0.0004456697 0.0018350503 -0.0002005010 -0.0002154786 -0.0001009943 -0.0000597984 -0.0001169871 -0.0000452843 0.0000268127 -0.0004190360 0.0000460967 -0.0021240281 0.0000662073 -0.0011311944 -0.0007455557 0.0015350366 -0.0004635030 0.0017176564 0.0042667062 -0.0103440893 0.0143896988 -0.0021984387 0.0128860393 -0.0187930785 -0.0072357592 -0.0116940579 -0.0178529004 -0.0248838585 -0.0030888997 0.0013368902 -0.0018967738 -0.0084155781 0.0239714374 0.0229339631 0.0104087931 0.0142383831 -0.0045388131 -0.0118292223 0.0486154791 0.0316350259 0.0173082302 0.0958306727 0.0756313721 -0.0254347540 -0.2322297430 0.0235951741 0.1126195700 0.0499289703 -0.0383849560 -0.0315164929 -0.0000387279 -0.0722685274 -0.0072333210 -0.0711046690 -0.0031584227 0.0306750252 -0.0662988741 0.0233756539 -0.0299476449 0.0242471265 0.0702813254 0.0086799873 0.0570814694 0.0242109594 0.0301460774 0.0626555949 -0.0999727109 0.0169268174 -0.2128664598 0.0560844323 -0.0989958985 0.0261546265 0.0110181240 0.0097263681 0.0210031223 -0.0180624972 -0.0088527981 0.0038131765 -0.0004770625 0.0000799986 -0.0052446611 0.0060828887 0.0034819119 -0.0057205429 -0.0054473272 -0.0041757012 -0.0122018063 0.0099404391 0.0058782694 -0.0096266492 -0.0084403597 0.0042624399 0.0015884393 0.0005883779 -0.0018808951 0.0008499083 -0.0013094623 -0.0033489130 0.0001495244 0.0007623146 0.0008759314 0.0002587666 0.0006303855 0.0002604614 -0.0013314918 -0.0025109850 -0.0010391688 0.0007439287 0.0022906957 0.0024980389 -0.0037937131 -0.0077229480 -0.0050024520 -0.0019867515 0.0020714998 0.0071527888 0.0018090090 0.0117935207 0.0052682534 -0.0041014302 0.0015775056 0.0032089875 0.0036142024 0.0002051414 -0.0005246612 0.0180334675 -0.0108218958 -0.0216462266 0.0041612187 0.0024021524 -0.0008585635 -0.0016399462 -0.0011675877 0.0001999363 -0.0001342848 -0.0005395177 -0.0017482762 0.0009233139 0.0015974817 0.0025367656 -0.0011743899 -0.0006491233 0.0006521536 -0.0010971350 -0.0009066028 -0.0005104802 -0.0108259318 -0.0016505096 0.0222072501 -0.0065672435 -0.0108965039 -0.0128794456 0.0065646187 -0.0000990034 -0.0178184580 0.0046006244 0.0056509000 0.0099614827 0.0078733345 0.0054636185 -0.0017374580 -0.0004880207 -0.0007142825 -0.0000880306 -0.0065652478 -0.0069844005 0.0011875577 -0.0692980796 0.0539091531 -0.0179602589 0.0004721451 -0.0004568790 0.0004521044 -0.0000510628 -0.0006752830 -0.0008598691 0.0000430274 0.0004138317 0.0003750226 0.0004516200 -0.0000976556 0.0002250218 -0.0004508136 0.0002235988 -0.0004804073 -0.0031843378 -0.0008366528 -0.0018773910 -0.0002759343 0.0000562767 -0.0000875443 -0.0000792257 0.0000845290 0.0001877644 -0.0000125760 -0.0001395091 -0.0000733120 0.0015386434 0.0006664764 0.0015659447 0.0030722326 -0.0000638422 0.0007712566 -0.0005464131 -0.0022029758 0.0013477724 0.0091579950 0.0070816410 0.0086330915 0.0112845951 0.0076192456 0.0014922631 0.0118084017 -0.0049565712 0.0094709364 0.0005582568 -0.0002476569 0.0003596582 -0.0003859481 -0.0000312209 0.0002729434 0.0005586307 0.0001691433 0.0000275864 0.0003833293 -0.0000185744 0.0000886901 0.0002674147 0.0004036480 -0.0002012327 -0.0001930357 0.0001075518 0.0000232696 -0.0870461644 -0.0342549869 0.0219882958 -0.0272555844 -0.0127586352 -0.0003833432 0.0169579042 0.0191545096 0.0209498755 0.0147470014 0.0035716901 -0.0048280185 0.0208312636 -0.0061675828 -0.0285461807 -0.0306456858 -0.0007619750 0.0198931183 0.1090463951 0.0693278869 0.0348372308 0.1044212306 0.0160848293 -0.0471503400 0.0000656346 0.0000341635 0.0002667300 0.0811836851 0.0263988952 -0.0175282687 0.0939809000 -0.0066685181 -0.0871913310 -0.0220632044 0.0183269733 0.0037285647 0.0096152392 -0.0188025417 -0.0223645456 0.0145489975 -0.0085045162 0.0034589346 0.0210585235 -0.0015408465 0.0280424731 -0.0298222595 0.0104379959 -0.0174094346 0.0809374593 -0.0826656847 -0.0415851494 0.0868332076 -0.0430531839 0.0362802498 -0.0000251913 -0.0000381492 -0.0000830577 0.0725374738 -0.0464106309 0.0108641622 0.0936972504 -0.0228606818 0.0821459177 -0.0018576145 -0.0000707631 0.0041236258 -0.0035071473 -0.0013109685 -0.0030682133 -0.0022381198 0.0004269817 -0.0039811559 -0.0026885449 0.0024930821 0.0032855488 -0.0528594931 0.0569632683 0.0359543361 0.0320422858 0.0239664996 -0.0139757431 -0.0112735405 0.0059961186 0.0066348822 -0.0219562023 -0.0483030164 0.0082666057 0.2431535265 -0.0561756324 -0.1453004472 0.1762181583 0.1978044339 -0.0821012553 0.0381954432 -0.0242717090 -0.0273337921 -0.0111091530 -0.0056377049 0.0063780574 -0.3120453351 0.0600151271 0.2217300835 -0.0489987690 0.1398149108 0.0415606036 0.0230069497 -0.0360100854 0.0130235216 -0.0639823888 -0.0405422035 -0.0342837123 0.0382278657 0.0121796405 0.0245232026 -0.0070514355 0.0075579224 -0.0051336718 -0.3106481650 0.0487893649 -0.2195493502 -0.0794983456 -0.1015657920 -0.0372128421 -0.0110810474 0.0001417939 -0.0057633794 -0.0054261311 0.0504695953 -0.0067245165 0.2432665687 -0.0242715642 0.1393857582 0.0982150370 -0.2288238517 0.0702422117 -0.0001666904 0.0002622955 0.0001861236 0.0002822874 -0.0010620905 -0.0010874034 0.0003180104 -0.0013581684 -0.0016780178 -0.0007285073 0.0001107059 -0.0006296954 0.0001106518 -0.0001843818 0.0003044834 0.0033406403 0.0003512787 0.0000831187 -0.0027064011 0.0034956272 -0.0001988023 -0.0029222298 -0.0008579962 -0.0039142343 0.0038110966 0.0025868462 -0.0010921349 -0.0019739138 -0.0003854131 0.0020338817 0.0010593389 -0.0011535936 -0.0009379648 -0.0015585060 -0.0024213174 0.0006231839 -0.0015359638 0.0012176214 0.0019540784 -0.0030225398 0.0000756060 -0.0005379170 -0.0010162136 0.0022381541 -0.0008501148 0.0013048711 0.0002811259 0.0005645593 0.0023300639 -0.0033835569 0.0006178417 -0.0040788979 0.0008274669 -0.0012675875 0.0039587100 0.0004701953 -0.0017043096 0.0028378714 -0.0033293177 -0.0008161221 -0.0055633213 0.0295248082 0.0217187750 0.0210071105 -0.0345349054 -0.0239348279 -0.0160666618 -0.0203785295 -0.0178018151 0.1181511792 -0.0767782203 -0.0568681594 0.1006331122 0.0893517898 -0.0385909633 -0.0011727847 0.0089576699 0.0154631465 0.0116390347 0.0379418172 0.0292095719 -0.0093091344 -0.0318319232 -0.0314214019 -0.0140415133 -0.0031844672 0.0221728492 0.0108386187 0.0095517752 -0.0046243651 -0.0415226410 -0.0373299991 0.0125835328 0.0433695519 0.0833447069 0.0479608107 0.0380694262 -0.0359512493 -0.1237285251 -0.0346877746 -0.1185299187 -0.0767146818 0.0743901213 -0.0240492452 -0.0528431938 -0.0441620415 -0.0022749225 0.0127844337 -0.2988752415 0.2071350570 0.3719330699 -0.0880986369 -0.0529040967 0.0080883046 0.0198158868 0.0139091492 0.0005766162 0.0003094072 0.0034523197 0.0195519226 -0.0053473696 -0.0096665417 -0.0254623661 0.0324183581 0.0114889177 -0.0462413340 0.0251706103 0.0249415453 0.0300232822 0.1667660921 0.0278884097 -0.3681829221 0.1821997943 0.2088183999 0.3272851830 -0.1030477627 -0.0020251941 0.2828831154 -0.1176489822 -0.1340156366 -0.2279466671 -0.1789192336 -0.1136662387 0.0371713811 0.0197036752 0.0235616398 0.0081365844 0.0487021251 0.0773569904 -0.0214583329 -0.0028836002 0.0016400718 -0.0009853620 0.0027001878 0.0028963896 -0.0226194318 -0.0084784508 0.0022546097 0.0103145904 0.0019060956 0.0034769828 0.0010085039 0.0000213109 -0.0016629055 0.0002058275 0.0004072617 0.0006672459 -0.0002477520 -0.0046564414 -0.0015900443 -0.0019748425 -0.0007126606 0.0008556444 0.0004791148 -0.0033503597 -0.0010417810 0.0003757696 0.0023672302 0.0029960390 0.0002769644 -0.0003763399 -0.0031410700 0.0005497389 -0.0048321200 0.0009996344 -0.0013083807 -0.0003576599 0.0016830006 0.0002553626 0.0170325781 0.0211398392 0.0086613758 0.0072666273 0.0119077952 0.0027200443 0.0281634951 -0.0110566204 0.0070948335 0.0012723783 0.0005486712 -0.0010576475 0.0002453212 -0.0014589131 -0.0016571111 0.0024929389 -0.0033885492 -0.0018946927 -0.0028035966 -0.0011291901 -0.0135759758 0.0073185713 -0.0152985293 -0.0049608221 0.0143101655 -0.0116750705 -0.0204667064 -0.0030762579 -0.0017759082 0.0003013065 -0.0007355526 0.0001021437 -0.0000180268 0.0002626825 0.0010618809 0.0009901201 0.0000425145 -0.0004156633 -0.0008729521 0.0011453361 -0.0000062169 -0.0007279769 -0.0013790153 0.0001326413 0.0012579543 0.0045278286 0.0006589072 0.0023402309 0.0044692233 -0.0032093397 0.0011255253 0.0006589105 0.0001974427 -0.0013416941 0.0038327029 0.0020992480 -0.0004519024 0.0036133277 0.0005467026 -0.0035243945 -0.0013113768 0.0013522262 0.0002336927 0.0007027893 -0.0009209562 -0.0009364378 0.0009855909 -0.0010291951 -0.0006005141 0.0005060235 0.0003424167 0.0015256814 -0.0008978780 0.0004882281 -0.0002075788 0.0034759708 -0.0057601791 -0.0015326644 0.0044046647 -0.0031132671 0.0029153821 -0.0002750998 0.0000230489 -0.0002787519 0.0022360770 -0.0008854380 0.0010127140 0.0035866955 -0.0001908553 0.0030415909 -0.0003938264 -0.0001845839 0.0014010332 -0.0001571920 0.0000041104 -0.0003201354 0.0000993573 0.0000181580 0.0001540427 -0.0001323444 0.0001770994 0.0000944703 -0.0018548398 0.0014854260 0.0012017997 0.0015932446 0.0001688886 -0.0008893319 -0.0012077916 0.0002881181 0.0006631417 -0.0003807945 -0.0015914252 0.0000664394 0.0104044896 -0.0025949885 -0.0058732624 0.0066483441 0.0069764323 -0.0030081086 0.0011893178 -0.0002534442 -0.0008043617 -0.0002085744 -0.0007763961 0.0000578689 -0.0095976376 0.0024353767 0.0070868260 -0.0021741158 0.0071915219 0.0019829996 0.0017716746 -0.0001878364 0.0009688834 -0.0017052058 -0.0006463797 -0.0008472170 0.0018687745 -0.0001360326 0.0011409770 -0.0002553829 0.0009597628 -0.0002440347 -0.0101853669 0.0011311621 -0.0065791345 -0.0055239857 -0.0069787905 -0.0025657201 -0.0010143411 -0.0003908805 -0.0005680601 -0.0001254335 0.0014994547 -0.0001812419 0.0076712743 -0.0012375027 0.0045941027 0.0036168707 -0.0088149808 0.0027288138 -0.0017771219 -0.0025317571 0.0025688832 0.0002811910 0.0015767806 0.0118787826 0.0162964988 0.0242200859 0.0205889458 0.0189700759 0.0110327683 0.0171883258 0.0069116546 0.0063430469 0.0031596173 -0.0562172579 -0.0332312722 -0.0207149163 -0.0090108719 -0.0229702870 0.0266870009 -0.0279671227 -0.0280783333 0.0029121391 0.0768915351 -0.0508113959 -0.0323851023 -0.1097629111 0.0999334031 0.0847018769 0.0397630332 0.0566477351 -0.0164804659 -0.0318269545 0.0567000617 0.0198155443 -0.0383849203 0.0124253930 0.0197039301 0.0434987319 -0.0142116040 0.0216966379 0.0353191543 0.0292282380 0.0146069787 -0.0285747704 0.0533636530 -0.0169559018 -0.0791064497 -0.0055031866 -0.0281791324 0.1527885330 0.0397454501 0.0882845570 -0.0175365284 -0.0004863340 -0.0090683364 0.0173249996 -0.0062334607 -0.0089268549 -0.0000185700 -0.0010975134 0.0019724756 -0.0004160244 0.0008827487 -0.0010822853 0.0007412803 0.0006635661 -0.0008843475 0.0044914016 -0.0059902048 -0.0016583482 -0.0114915803 -0.0107095449 0.0024001978 -0.0042690557 -0.0054091151 -0.0006067392 -0.0054980221 -0.0010802091 0.0053326454 0.0050356470 0.0101194123 0.0066596758 0.0022497210 -0.0033774475 -0.0087237688 0.0005238812 0.0054624590 0.0058545071 0.0088632498 0.0058820498 -0.0065749510 -0.0078014631 -0.0167251558 -0.0126398884 -0.0068122336 0.0017451016 0.0145370869 -0.0021669020 -0.0073170608 0.0010658109 0.0014839379 -0.0011388852 -0.0019114082 -0.0016538950 -0.0009842721 -0.0004123512 -0.0033174071 0.0012886463 -0.0003251881 0.0031549628 0.0027156252 -0.0000387439 0.0056489616 0.0035373931 -0.0007655484 -0.0025654455 -0.0003243836 0.0063747599 -0.0022364541 -0.0027803883 -0.0048682919 -0.0017997553 -0.0004656253 0.0041340124 -0.0017125001 -0.0021252472 -0.0036727682 0.0072988511 0.0009471842 -0.0163520351 0.0043929381 0.0054346028 0.0082074498 -0.0012391496 0.0007384723 0.0004241116 -0.0013154441 -0.0008138067 -0.0025375467 -0.0109645913 -0.0068315900 0.0021204119 -0.0040330569 -0.0051243794 -0.0005030304 -0.0018725353 -0.0015419747 -0.0018084345 0.0357946491 -0.0581301024 -0.0671991947 0.0005743803 -0.0001874930 -0.0018224434 -0.0003467692 0.0002881264 0.0005670684 0.0001881608 0.0004088494 0.0002889046 -0.0002909870 -0.0000915040 -0.0001765207 0.0004052061 -0.0000211153 0.0007023855 0.0013233488 -0.0000600353 0.0014348864 0.0001478608 0.0000285562 0.0000318893 -0.0005292413 -0.0000998343 0.0001951222 0.0002541273 0.0002036660 0.0000527397 -0.0030645102 -0.0013814634 -0.0026892085 -0.0026104014 0.0002055302 -0.0005357686 0.0017399682 0.0006651830 -0.0028569679 -0.0009384410 0.0041180097 -0.0062464336 -0.0096073072 -0.0041848102 -0.0003851694 -0.0006192722 0.0004710992 -0.0092523337 -0.0000131520 0.0000383870 0.0000561164 -0.0000129776 -0.0005682201 0.0003316537 -0.0010003374 0.0000395904 0.0000099746 -0.0004084544 -0.0003755806 -0.0024083562 0.0005128441 -0.0019676550 -0.0003604109 0.0009327727 -0.0006546107 -0.0013450426 -0.0553064631 -0.0744078352 -0.0982250272 0.0558664121 0.0542955113 0.0519328716 -0.0166522192 0.0218547170 0.0516478663 -0.0030001109 -0.0712272007 -0.1325620680 0.0395812581 0.0231732779 0.0103992335 -0.0725313361 0.0182959270 0.0985601148 -0.0917616652 -0.0275332670 0.0238213458 -0.0741413180 0.0231670396 0.1113819606 -0.0044533460 0.0071788019 -0.0014305339 0.1767673197 0.1072869813 0.0449185846 0.1917532244 0.0320488442 -0.1367133510 -0.0173818540 0.0327634340 0.0365022789 0.0106251081 0.0118682025 0.0376745726 -0.0140869412 -0.0331590708 -0.0870925933 -0.0231669196 0.0182652922 0.0032254397 0.0523402083 -0.0080527660 0.0663642207 0.0236199658 -0.0064570484 0.0256664489 0.0265784048 0.0077153021 0.0570421897 0.0018244208 0.0017213705 -0.0013609709 -0.1049565294 0.0995041417 0.0371089250 -0.1174254822 0.0617987134 -0.0832932815 -0.0096183663 -0.0027476258 0.0129609734 0.0125288810 0.0024347536 0.0051601267 0.0074179263 -0.0028031648 0.0095013909 -0.0058872609 0.0037878565 0.0029672049 -0.0787867499 -0.0257986259 0.0363987526 0.0380108977 -0.0551954450 -0.0269149256 -0.0540704306 0.0342208378 0.0343360021 0.0079095216 -0.0423961398 -0.0085017503 0.2540298148 -0.0418156556 -0.1453609751 0.2074015899 0.2034103285 -0.1002455096 0.0451113489 0.0228695598 -0.0264164817 -0.0080812145 -0.0336607119 0.0023905365 -0.1519627396 0.0742485997 0.1102716871 -0.0785414799 0.2491503860 0.0680860075 -0.0492618941 -0.0287741738 -0.0259420748 0.0630591885 -0.0387224326 0.0325800626 -0.0360669908 0.0284627726 -0.0255503283 -0.0002857983 -0.0288418246 0.0027827604 0.1923896362 0.0077571924 0.1319982620 0.1388422534 0.1862898630 0.0647711418 0.0529461108 0.0147459172 0.0288931963 -0.0157014957 -0.0400067736 -0.0060755562 -0.2358801835 0.0423063728 -0.1320884630 -0.1241591024 0.2504343596 -0.0871099373 0.0000445880 0.0001434757 0.0010390025 -0.0002914847 -0.0009549933 -0.0021445132 0.0015553891 -0.0009296840 -0.0009580486 -0.0007555938 0.0010358729 -0.0011714881 0.0005696094 0.0005406518 0.0002756726 -0.0043468057 -0.0028723636 -0.0019847885 -0.0009703253 -0.0021363131 0.0025217793 -0.0026515511 -0.0021377669 -0.0002872445 0.0202507120 -0.0711945409 -0.0089396056 0.0769858468 0.0413431246 -0.0067384340 -0.0177189040 0.0544614453 0.0111713912 -0.0289696021 0.0501218008 0.0237954670 0.0487066321 0.0393532087 -0.0191815184 0.0114449241 -0.0337459748 0.0060852448 -0.0750561667 -0.0668061608 -0.0369825641 -0.0121140966 -0.0886129249 -0.0004603828 0.0960382816 0.0660240549 0.0323619123 -0.0474711337 -0.0964329559 -0.0576852539 0.0034892737 -0.0064494980 0.0010993878 -0.0034640060 0.0056843367 0.0028090953 0.0001059190 -0.0008691058 -0.0006714206 0.0006374147 0.0002261283 0.0002791050 0.0015286321 0.0017439302 0.0022851767 0.0058227383 -0.0012225550 0.0045704239 -0.0796758193 -0.0737182198 0.0218246848 -0.0182496779 -0.0258226591 -0.0071338534 -0.0229161247 -0.0005858401 0.0266059485 0.0277233940 0.0553253404 0.0357235772 0.0094121294 -0.0195039173 -0.0446685266 0.0005320269 0.0236069923 0.0317802496 0.0446685054 0.0320676525 -0.0269975355 -0.0477120501 -0.1067081851 -0.0788981549 -0.0385941667 0.0065624216 0.0819385975 -0.0243899580 -0.0407008571 -0.0008978770 0.0117450720 -0.0065555296 -0.0103530021 -0.0063341895 -0.0086912504 -0.0119739408 -0.0453961246 0.0275861650 0.0350677220 0.0244089468 0.0202541596 0.0060420144 0.0393650174 0.0254114352 -0.0068803743 -0.0195106042 -0.0022562755 0.0465106314 -0.0176449314 -0.0207113196 -0.0325484688 -0.0139662652 -0.0038252814 0.0262477714 -0.0105160893 -0.0137099631 -0.0260354585 0.0498656724 0.0070406429 -0.1130789171 0.0275873302 0.0342877437 0.0549688537 -0.0102897138 0.0008390428 0.0072976035 -0.0110553459 -0.0125189962 -0.0265223029 -0.0790462695 -0.0519162483 0.0143200243 -0.0208509738 -0.0259627524 -0.0053549194 -0.0291715227 -0.0476419600 0.0057881927 -0.0167797780 0.1016045134 0.1801163129 0.0020339300 0.0019756771 -0.0040677498 -0.0037091827 -0.0004491927 0.0018379530 0.0003425335 0.0003242900 0.0003312667 0.0005998094 -0.0002284655 0.0002164931 -0.0006399455 0.0002253465 -0.0015436737 -0.0025128276 -0.0004410415 -0.0027663539 -0.0004300312 0.0000761905 0.0001987906 0.0004628207 0.0005076382 -0.0000311478 -0.0003925869 0.0007940297 0.0012722462 0.0066827913 0.0008544588 0.0066550282 0.0028623576 -0.0001629498 0.0013657940 -0.0040425316 -0.0000601879 0.0064726110 0.0017893145 -0.0028963091 0.0061215965 0.0146843568 0.0154163243 0.0033041370 0.0057286894 -0.0028243061 0.0205721908 0.0002092800 0.0002783528 -0.0012882929 0.0001331291 0.0012264615 -0.0010259744 0.0020763489 -0.0011947777 -0.0005127324 0.0025124631 -0.0005368693 -0.0117237161 0.0058678469 -0.0068794197 -0.0033578731 0.0032594985 -0.0037481573 -0.0055376435 -0.0163434207 -0.0952713031 -0.1580128417 0.1047547390 0.0871027529 0.0670191845 -0.0540686373 0.0151464900 0.0681035462 -0.0146229367 -0.0979500139 -0.1731124505 0.0638524752 0.0473715809 0.0340302288 -0.0876413032 0.0222999286 0.1199295972 -0.1633344652 -0.0750940144 0.0132055595 -0.1069072372 0.0140369978 0.1231924207 -0.0066528812 0.0084550987 -0.0025609781 0.1167218995 0.0850341057 0.0485406162 0.1587834841 0.0376604522 -0.0975790574 0.0676931361 -0.0993769274 -0.0855037244 -0.0492905544 -0.0042095621 -0.0769931198 0.0191125622 0.0842635105 0.1970222054 0.0525395628 -0.0558462894 -0.0349063384 -0.1021460574 0.0138278300 -0.1366630972 -0.1018248608 0.0776624355 -0.0277810010 -0.0904074055 0.0084729481 -0.1201628671 -0.0050438077 -0.0027179954 0.0039776446 0.1340030955 -0.1441462379 -0.0707202398 0.1614496996 -0.1040273651 0.0994653757 -0.0113736946 -0.0034784941 0.0136134763 0.0191518443 0.0041895802 0.0090295696 -0.0146845634 0.0060147878 -0.0174583153 0.0161914694 -0.0112233445 -0.0101646013 -0.0255221241 -0.0259229989 0.0075588863 -0.0007617524 -0.0331607153 -0.0039027413 -0.0365933029 0.0035142022 0.0214020989 0.0259622727 0.0023394677 -0.0146153767 0.0881626194 -0.0298440184 -0.0499961519 0.0359727272 0.0110910262 -0.0205578983 -0.0069302117 0.0316555816 0.0091890842 0.0104177925 -0.0203169892 -0.0079459358 0.1095133730 0.0061159980 -0.0776987080 -0.0061250383 0.0550775356 0.0078935355 0.0447985495 0.0556682107 0.0225645695 -0.0565019062 0.0685995306 -0.0269988094 0.0105930918 -0.0505840599 0.0095921600 0.0174124877 0.0388233116 0.0065257738 -0.0289037685 -0.0516123731 -0.0125209199 -0.1296116362 -0.1929979463 -0.0587702288 -0.0763089100 -0.0050907063 -0.0428576851 0.0345198099 0.0169299581 0.0182479917 0.2483463719 -0.0337988981 0.1357260474 0.1188155280 -0.2033809821 0.0820781646 0.0006240887 0.0005075868 0.0034426759 -0.0005162217 -0.0055288565 -0.0112580169 0.0029995265 -0.0045186094 -0.0032527682 -0.0077518124 -0.0013137991 -0.0054903382 0.0001238401 -0.0004495322 0.0006262692 -0.0089913120 -0.0050051355 -0.0014299120 0.0003079974 -0.0026558455 0.0013293916 0.0003322972 0.0009262493 0.0005385984 -0.0124672157 0.0253729994 0.0064522748 0.0021831075 -0.0249929478 -0.0111346724 -0.0018713878 -0.0210810931 -0.0005461927 0.0085290189 -0.0209470555 -0.0070298194 -0.0080667064 -0.0074035569 0.0030359744 -0.0083150048 0.0112870468 -0.0041667711 0.0123466166 0.0136495568 0.0061337226 0.0070600779 0.0161176680 0.0022238650 -0.0146301970 -0.0184062478 -0.0043294449 -0.0028399721 0.0192999927 0.0065903182 0.0034247716 0.0022113046 -0.0000673930 0.0014598055 -0.0031886607 0.0000430744 -0.0042371751 0.0042483084 0.0031836182 0.0050753318 -0.0063541128 -0.0050739294 0.0015997508 0.0016442682 0.0022729724 -0.0074741133 0.0280062704 0.0310254994 -0.2227952812 -0.2050665580 0.0631019498 -0.0458500557 -0.0666923571 -0.0211623559 -0.0562670823 0.0007311366 0.0681434263 0.0741687124 0.1480078557 0.0957687006 0.0234167580 -0.0531702121 -0.1181976215 0.0002851260 0.0593792676 0.0857913553 0.1167144638 0.0844175266 -0.0680504528 -0.1310838803 -0.2918676503 -0.2156028956 -0.1041605247 0.0154740730 0.2196508814 -0.0780077155 -0.1071212228 -0.0094238668 0.0284677400 -0.0156312391 -0.0236785601 -0.0108633753 -0.0266768735 -0.0439486051 -0.1270544348 0.0789387810 0.1024201115 0.0882039159 0.0694844418 0.0203144430 0.1327316346 0.0862359645 -0.0243375258 -0.0671440021 -0.0077995849 0.1578099481 -0.0613183196 -0.0709972690 -0.1098482557 -0.0489227329 -0.0124301684 0.0889808212 -0.0366857218 -0.0472766256 -0.0888530037 0.1588148254 0.0225563030 -0.3611101558 0.0939139349 0.1097750168 0.1859713002 -0.0285314616 -0.0040091953 0.0210605794 -0.0344021421 -0.0415784662 -0.0845385201 -0.2628798884 -0.1750310530 0.0471457471 -0.0542604816 -0.0680067283 -0.0155816356 -0.1003707013 -0.1457958176 0.0264026576 -0.0015455726 -0.0218801206 -0.0453167709 0.0020239394 0.0037130432 -0.0070244067 -0.0065830102 0.0003640522 0.0041900611 0.0003278412 -0.0005667142 -0.0000258778 0.0001726944 -0.0005806405 0.0001486833 -0.0000705500 0.0006361217 -0.0000574374 0.0009311489 -0.0025662282 0.0010328487 -0.0003563594 0.0005085728 0.0001199556 0.0014345621 0.0013229639 -0.0003957407 -0.0010035415 0.0017038503 0.0032091724 -0.0013664093 -0.0021629396 -0.0004172479 0.0005190304 0.0004823687 0.0013675931 0.0010800721 -0.0029506189 -0.0005512369 0.0000486328 0.0242231516 -0.0282409893 -0.0249384585 0.0234996518 0.0089069724 0.0162216182 -0.0069023842 0.0027022812 0.0018187314 0.0000518501 -0.0005285703 -0.0004188375 -0.0020406168 0.0004625209 -0.0002742013 -0.0017214846 -0.0011466749 0.0056938043 -0.0016372514 -0.0286438019 0.0115939000 -0.0165661303 -0.0064112295 0.0062957104 -0.0074670369 -0.0090681342 0.0082741603 0.0236682645 0.0384841730 -0.0211181747 -0.0200691574 -0.0180229233 0.0072506284 -0.0050334209 -0.0155656759 0.0030880659 0.0245010289 0.0439247618 -0.0128731223 -0.0099651206 -0.0080651817 0.0204703652 -0.0066045441 -0.0304538536 0.0400598003 0.0169856286 -0.0068349154 0.0304599677 -0.0058361899 -0.0368298822 0.0006561810 -0.0022543131 0.0022060909 -0.0431400945 -0.0301884046 -0.0157569234 -0.0410555497 -0.0095611675 0.0228796006 -0.0188002638 0.0261581484 0.0206420649 0.0140769759 -0.0010450372 0.0175958804 -0.0031149025 -0.0211617359 -0.0470418300 -0.0126948100 0.0147991559 0.0108510556 0.0229274871 -0.0028329624 0.0313342550 0.0282700155 -0.0247795107 0.0040948961 0.0242457155 -0.0049326391 0.0283508889 0.0007268665 0.0007513150 -0.0011745065 -0.0225686467 0.0262685603 0.0156838403 -0.0302759972 0.0216482200 -0.0163308218 0.0032644007 0.0012243272 -0.0056661137 -0.0042562968 -0.0012690798 -0.0021259996 0.0035209373 -0.0013813016 0.0042473034 -0.0039195170 0.0027647140 0.0023984368 0.0150144334 0.0107382608 -0.0057569351 -0.0027519466 0.0143119206 0.0032307917 0.0148190854 -0.0053759374 -0.0090593756 -0.0069432978 0.0043377719 0.0043749666 -0.0473168438 0.0105051960 0.0270394646 -0.0320252337 -0.0257451970 0.0162839568 -0.0035521771 -0.0105224485 0.0008274759 -0.0017241565 0.0084663655 0.0017035856 -0.0113766578 -0.0097549994 0.0077002776 0.0096989882 -0.0397524055 -0.0090584681 -0.0038636978 -0.0099913874 -0.0017265450 0.0072185409 -0.0116341904 0.0031683236 0.0027410049 0.0088416814 0.0013269283 -0.0043234868 -0.0052779708 -0.0020596376 -0.0205865220 0.0121649064 -0.0158468341 0.0117908696 0.0209623712 0.0050835124 0.0120173755 -0.0013217017 0.0068904345 -0.0070584243 0.0009556159 -0.0040330897 -0.0341122116 0.0023919566 -0.0181732873 -0.0138703945 0.0175027436 -0.0093239737 0.0031303949 0.0022581740 0.0087345925 -0.0008530252 -0.0155861232 -0.0356657812 -0.0004104821 -0.0128096424 -0.0057648202 -0.0256250988 -0.0120998505 -0.0122702551 0.0034118956 0.0011115075 0.0006043900 -0.0258616386 -0.0152607522 -0.0083012238 -0.0077208899 -0.0093947859 0.0118881521 -0.0065331744 -0.0051264400 -0.0012175805 0.0032528787 -0.0054626079 -0.0018315417 -0.0026208967 0.0059614542 0.0034614053 0.0007512821 0.0046097985 -0.0000246329 -0.0022430588 0.0042723402 0.0014116641 0.0016850408 0.0007939898 0.0003513022 0.0013878970 -0.0017734891 0.0014011104 -0.0000819984 -0.0022976757 -0.0001568694 -0.0014788496 -0.0022879039 -0.0006580661 0.0009740734 0.0038760705 0.0001753666 -0.0005499929 -0.0026058780 -0.0009483692 0.0000593268 -0.0009801542 -0.0023082625 0.0004466242 -0.0005557488 -0.0010329680 -0.0023120402 0.0223244079 0.0176883081 0.0153564095 -0.0244321806 -0.0179516485 -0.0121319773 -0.0174616538 -0.0184585445 -0.1037286966 0.0884925974 0.1234002802 0.1843914201 0.1789240630 -0.0350283693 0.0510354490 0.0745992591 0.0236172354 0.0275681905 -0.0307479885 -0.0752121556 -0.0758295490 -0.1437542435 -0.0868108450 -0.0104853276 0.0583454145 0.1019650609 -0.0013792055 -0.0707090684 -0.0983852734 -0.1204316224 -0.0974422445 0.0656568062 0.1126453320 0.2628665229 0.2028909412 0.0747370514 0.0188768970 -0.1160227277 0.1394576804 0.2595535183 0.0888174641 -0.0540872351 0.0351059563 0.0553387123 0.0331137593 0.0026172854 -0.0111548799 0.2185987340 -0.1554620805 -0.2724195507 0.1360129907 0.0841329764 -0.0171956519 0.1502947834 0.0975214240 -0.0277177019 -0.0706696958 -0.0061337857 0.1681951650 -0.0732028835 -0.0852904990 -0.1345382936 -0.0610085018 -0.0098453072 0.1334198201 -0.0648773321 -0.0725634181 -0.1121004683 0.1062399751 0.0108189738 -0.2238933525 0.0866632481 0.0935332306 0.1646618237 0.0087787198 0.0051735533 -0.0531818158 0.0148007253 0.0205687079 0.0344603847 -0.2352569185 -0.1586694887 0.0433919397 0.0649585216 0.0802355537 0.0064871056 0.0158129638 0.0525444384 0.0386283515 0.0006616400 0.0026917054 0.0069978181 -0.0096993234 -0.0029702928 0.0290708352 0.0113216369 -0.0011266851 -0.0106788138 -0.0034676146 -0.0073571374 -0.0030872308 0.0015366849 0.0019641047 0.0011065105 -0.0002605885 -0.0003758624 0.0008095102 -0.0020279185 -0.0063030850 -0.0025186038 -0.0001737784 -0.0003157762 -0.0012445069 0.0056801705 0.0021530441 -0.0017317810 -0.0027340007 -0.0023447062 0.0010323482 -0.0069188915 -0.0014982650 -0.0061688679 0.0008134434 -0.0004914685 0.0029394433 0.0050000413 -0.0005880574 -0.0101235818 0.0050063921 0.0370282347 -0.0362070871 -0.0184845475 0.0616378239 0.0196305913 0.0279958932 -0.0145330797 0.0341627908 0.0027850060 -0.0016699960 0.0025467115 -0.0030811241 -0.0013801235 0.0062612308 -0.0035312451 0.0032519202 0.0008549014 0.0024341112 -0.0005583886 0.0002076762 -0.0105178089 0.0053508051 0.0067932938 -0.0150845250 0.0124205187 0.0299090924 -0.0012229371 -0.0028768978 -0.0046635510 0.0001509506 0.0017300321 0.0024857898 0.0018971161 0.0005421711 0.0012266130 -0.0003250464 -0.0028581078 -0.0055290818 -0.0006538617 0.0002399121 0.0003468682 -0.0017542226 0.0013997121 0.0047357124 -0.0079170716 -0.0051076454 0.0021708191 -0.0052645416 0.0046036029 0.0034108919 0.0019691970 0.0012462581 0.0036356470 0.0107692591 0.0054282666 0.0041636523 0.0076661703 0.0036704313 -0.0047806151 0.0029305950 -0.0039055950 -0.0032400064 -0.0021612933 0.0003136052 -0.0024550545 0.0008592205 0.0027228292 0.0066408862 0.0014656033 -0.0020652504 -0.0018617508 -0.0027578268 0.0002645509 -0.0039917383 -0.0049898442 0.0030533426 -0.0001180734 -0.0027545801 0.0002420423 -0.0028072311 -0.0020916649 0.0011341576 -0.0001016094 0.0025329442 -0.0026906073 -0.0025373443 0.0028518060 -0.0016409971 0.0003124288 -0.0005849113 0.0004592397 -0.0008005573 -0.0011801284 -0.0012340580 -0.0013705079 0.0001889513 0.0000898700 0.0009840862 0.0013782560 -0.0013340197 -0.0016957170 -0.0032634765 -0.0023487710 0.0012821951 0.0008502136 -0.0030481793 -0.0008270484 -0.0035803282 0.0014383991 0.0021965891 0.0013586051 -0.0012484452 -0.0008868363 0.0119736779 -0.0025243067 -0.0069657906 0.0083230548 0.0071582060 -0.0041705320 0.0010290781 0.0023261539 -0.0003901464 0.0003914922 -0.0021282550 -0.0004054078 0.0006042637 0.0027161819 -0.0001417063 -0.0026343992 0.0105419473 0.0024452022 -0.0008365493 0.0011829696 -0.0005041100 -0.0004320982 0.0012140277 -0.0001238552 -0.0009820901 -0.0007695551 -0.0006438498 0.0003915788 -0.0001272034 0.0002525758 0.0077510358 -0.0017515237 0.0057552203 0.0016890759 0.0016172643 0.0008042889 -0.0005663921 0.0004420133 -0.0003725990 0.0008258184 -0.0007775926 0.0005201859 0.0003567812 0.0004727552 0.0001346739 -0.0001812748 0.0022076892 -0.0001875848 0.0040346868 0.0001582315 -0.0060333972 -0.0134266398 0.0235438621 -0.0019295297 -0.0338156781 -0.0256712919 -0.0129738827 -0.0064432994 -0.0039328825 -0.0177392949 -0.0057846605 -0.0011829341 -0.0046195148 0.0516581610 0.0238164292 0.0065585875 0.0208703211 0.0072633198 -0.0224506278 0.0353278677 0.0279440536 0.0097969418 -0.0635502874 0.0333144845 0.0412782247 0.1117073463 -0.1024749696 -0.0607792854 -0.0565793995 -0.0559543672 0.0187740452 0.0400041831 -0.0797603711 -0.0260803585 0.0325396987 0.0409420364 -0.0138096789 -0.0348123564 0.0583448140 -0.0203482814 -0.0394473712 -0.0420501542 -0.0147644848 0.0458499188 -0.0440678714 0.0193633607 0.0459457279 -0.0140350579 0.0301918457 -0.1403979748 -0.0285134275 -0.0548018499 0.0113380657 -0.0010913164 0.0048006417 -0.0078646790 -0.0033437282 0.0029261178 0.0004714126 -0.0019504327 0.0003515379 -0.0009490587 0.0013145441 0.0011215170 -0.0009920740 -0.0009068456 -0.0003797865 -0.0021374389 0.0009144995 -0.0006181741 0.0127154691 0.0120972728 -0.0023656925 0.0040720907 0.0054764033 0.0012605560 0.0029969083 -0.0007261219 -0.0052934450 -0.0056765873 -0.0107680957 -0.0065968443 -0.0010989127 0.0044592171 0.0083061690 -0.0006319099 -0.0055124290 -0.0075488721 -0.0082709604 -0.0058721599 0.0053843234 0.0082387067 0.0190910969 0.0146612349 0.0059460801 0.0010214605 -0.0097383724 0.0108513615 0.0155034375 0.0064617546 -0.0025756261 0.0011333696 0.0021756683 0.0007448126 0.0018837550 0.0039769987 0.0158290388 -0.0098248060 -0.0192117590 -0.0024931724 -0.0022161321 -0.0022398430 -0.0048278039 -0.0032345806 0.0012203073 0.0028785178 0.0004351020 -0.0062244188 0.0023948785 0.0025363021 0.0032968346 0.0018292000 0.0004805069 -0.0019128158 0.0005577557 0.0010925612 0.0028300489 -0.0073664714 -0.0010718818 0.0175288651 -0.0047515057 -0.0051256255 -0.0096852862 0.0016864662 0.0016627368 -0.0035521137 0.0032913537 0.0044230491 0.0080238925 0.0105686726 0.0076145340 -0.0017032925 0.0041942182 0.0050752636 0.0006809272 0.0019003947 0.0066178648 0.0010367036 -0.0435449542 -0.0643069921 -0.1629407070 -0.0000759349 -0.0012888259 -0.0012759255 0.0009745467 0.0007988149 0.0003210453 0.0000960536 0.0004419660 0.0002627398 -0.0004930814 -0.0001433734 -0.0003220354 0.0004319486 -0.0000323020 0.0010452502 0.0022278632 0.0003619361 0.0022368914 0.0002234046 0.0000821599 0.0000186401 -0.0009584563 -0.0003563801 0.0002763056 0.0005475843 0.0000058353 -0.0004033164 -0.0040802109 -0.0008494910 -0.0039047953 -0.0020822027 0.0002712017 -0.0013910410 0.0024292335 -0.0001115798 -0.0036074675 -0.0031753345 0.0012616843 -0.0066881343 -0.0125231108 -0.0101102246 -0.0018753260 -0.0053096621 0.0025268000 -0.0147762599 0.0001601093 -0.0000836311 0.0006359984 0.0001255754 -0.0013534183 0.0001657804 -0.0014226156 0.0004482384 0.0002086182 -0.0016332231 -0.0004436694 0.0004953671 -0.0015883296 -0.0006047846 0.0007942894 0.0000632891 0.0005897056 0.0004407730 0.0270881198 -0.0756801772 -0.1321158962 0.1100970637 0.0788213979 0.0419618146 -0.0794171398 -0.0017783719 0.0579118444 -0.0201255697 -0.0734973348 -0.1214124215 0.0784719271 0.0563185166 0.0369743728 -0.0711711739 0.0105441463 0.0800893484 -0.1487513874 -0.0980414762 -0.0089055448 -0.0449148411 -0.0070065003 0.0300641146 -0.0030544221 0.0048573636 -0.0034271820 -0.0435158229 -0.0097064959 0.0061464960 0.0510043988 0.0144426627 -0.0227975223 -0.0889942941 0.1087407238 0.0647141342 0.0781648255 -0.0245312921 0.0615829752 -0.0023900292 -0.0745789731 -0.1526615965 -0.0629384408 0.0726697523 0.0504871843 0.0790767768 -0.0149059292 0.0949246414 0.1166051338 -0.1300939305 -0.0118844561 0.0596142580 -0.0221517664 0.0485797416 0.0028255076 0.0014645737 -0.0044842254 0.0189619508 0.0034946023 0.0177825670 -0.0456581830 0.0435021278 -0.0160758059 -0.0075553322 -0.0024596369 0.0084507246 0.0141156608 0.0033959290 0.0067905993 0.0100412415 -0.0044063368 0.0108197694 -0.0140462737 0.0100749810 0.0093434352 0.0636915883 0.0559108698 -0.0257803257 -0.0384732040 0.0580051724 0.0278712151 0.0543740022 -0.0502715830 -0.0360596780 -0.0004180069 0.0404337500 0.0042070329 -0.2040223951 0.0108613334 0.1133815520 -0.2082701608 -0.2178921976 0.0985946802 -0.0539774213 -0.0242116204 0.0316995167 0.0088950255 0.0434088778 -0.0020683313 0.1822753488 -0.0860324220 -0.1312291391 0.0925275438 -0.2890044217 -0.0796402358 0.0475689210 0.0251280281 0.0255457586 -0.0340296286 0.0518849434 -0.0192134046 0.0449318931 -0.0254689051 0.0308366508 -0.0020995327 0.0322042399 -0.0044400731 -0.2256133577 -0.0004974247 -0.1550371461 -0.1502737788 -0.1946277615 -0.0705976028 -0.0462196987 -0.0293439538 -0.0241594942 0.0030521767 0.0394356416 -0.0008298350 0.1450192101 -0.0504247062 0.0820227536 0.1044738827 -0.2370246357 0.0741068754 -0.0000473257 -0.0000067676 0.0003795903 -0.0008093676 0.0015373899 0.0011136746 0.0009801266 -0.0006535593 -0.0009105192 0.0018385396 0.0028687169 -0.0008249171 0.0011728058 0.0011290926 0.0001623091 -0.0041117589 -0.0023801285 -0.0022215927 -0.0025834446 -0.0015050739 0.0037293123 -0.0055050269 -0.0052161762 -0.0007188905 0.0816918003 -0.1138404837 -0.0583758716 0.0162644930 0.1371896669 0.0210572603 0.0169527865 0.1188656057 0.0064322163 -0.0799800857 0.1076829942 0.0618853501 0.0937498379 -0.0164962823 -0.0421504392 0.0873486397 -0.0009603946 0.0396163358 -0.1096401531 -0.0843463055 -0.0624756130 -0.0081551006 -0.1193268614 -0.0048735843 0.1108231492 0.0705748830 0.0605360373 -0.0478190002 -0.1319473632 -0.0345734529 -0.0307199209 -0.0226258255 -0.0112538508 -0.0228577298 0.0314466112 0.0105171300 -0.0066936044 -0.0000167805 -0.0008749738 0.0066596267 -0.0075753636 -0.0042696817 0.0082341179 0.0081350816 0.0069323823 0.0111352160 -0.0134944594 -0.0072429053 0.0071336172 0.0053836272 -0.0049647604 -0.0031792438 -0.0029858358 0.0010360634 -0.0005348811 -0.0018186979 0.0001449332 0.0011679347 0.0017720992 0.0008853803 0.0004044378 -0.0004925963 -0.0013307164 0.0012303538 0.0034599499 0.0028669432 0.0032673271 0.0023125989 -0.0040130487 0.0023139308 0.0041230855 0.0021863193 0.0020247551 -0.0016275013 -0.0059316538 -0.0053193165 -0.0111899374 -0.0063368464 -0.0013295629 0.0006005223 0.0006695061 -0.0017763900 0.0007187681 0.0009774071 0.0032591873 -0.0048931760 -0.0046996798 0.0010636705 0.0001682838 -0.0004282865 -0.0004341028 -0.0001969909 -0.0001588008 0.0006958322 0.0005942404 -0.0000536832 -0.0004959289 -0.0009332646 -0.0011341451 -0.0007945398 0.0004650340 0.0029527492 -0.0008046001 -0.0010069166 -0.0018075311 -0.0007940013 -0.0003244330 0.0050440868 -0.0037003793 -0.0012831696 -0.0065666748 0.0021405696 -0.0001698593 -0.0017343920 0.0045481035 0.0047539065 0.0076374488 0.0081814262 0.0045447321 -0.0014187026 -0.0028185214 -0.0031176053 0.0007066377 0.0225120894 0.0204466017 -0.0108842008 -0.0464842358 -0.0357581984 -0.1020812874 -0.0019775502 0.0000880989 0.0022666638 0.0035710972 0.0023415444 0.0002681299 -0.0007217568 -0.0017778270 -0.0012409494 -0.0003854954 0.0002815703 -0.0003565085 0.0007631893 -0.0002646140 0.0008108074 0.0024780787 0.0014964350 0.0015187496 0.0003612347 -0.0000367149 -0.0000063303 -0.0006656776 -0.0004542629 -0.0000392661 0.0007351576 -0.0003812284 -0.0009110280 -0.0031740136 -0.0029363777 -0.0023789629 -0.0064881102 0.0002746903 -0.0011194504 0.0012387107 0.0042092106 -0.0031383584 -0.0088562854 -0.0132794472 -0.0006948796 -0.0034589135 -0.0130197842 -0.0034884519 -0.0155651441 0.0066247294 -0.0086870311 -0.0003598117 -0.0000306165 0.0008178968 0.0003126978 -0.0008133206 0.0000218140 -0.0014054001 0.0009472408 0.0005036336 -0.0038373925 -0.0005594671 0.0053999586 -0.0062472774 0.0019153817 0.0035490585 -0.0026898263 0.0038229273 0.0064200894 -0.0299707163 0.0435600087 0.0734736617 -0.0835581444 -0.0528125620 -0.0168683801 0.0695807938 0.0086814470 -0.0380419093 0.0168835142 0.0412128310 0.0629764699 -0.0690866591 -0.0445370274 -0.0228705876 0.0505808246 -0.0000414896 -0.0415234898 0.1089316457 0.0881057407 0.0211502071 0.0024642555 0.0141660208 0.0221625616 -0.0009710627 -0.0021910603 0.0026555736 0.0939736903 0.0481750560 0.0197440088 -0.0194281847 -0.0008489750 0.0178946184 -0.0762454847 0.0842892019 0.0357272406 0.0724168739 -0.0306783201 0.0414935864 0.0049054056 -0.0494076715 -0.0913731235 -0.0605555780 0.0649155247 0.0377784218 0.0573155954 -0.0167858252 0.0538071109 0.0938415983 -0.1246432451 -0.0304419700 0.0188943987 -0.0180332645 -0.0044445253 -0.0008833134 0.0016041620 -0.0035996247 0.0728489528 -0.0570444647 -0.0184705652 -0.0156009814 0.0163251844 -0.0111532777 0.0040856814 0.0012949423 -0.0044520869 -0.0066650762 -0.0015472964 -0.0026206649 0.0061007559 -0.0026786343 0.0064770541 -0.0079631495 0.0055420103 0.0046622094 -0.0673261520 -0.0831616955 0.0215176958 0.0164550141 -0.0715168213 -0.0189264851 -0.1032709513 0.0395367083 0.0628615251 0.0437132336 -0.0178445358 -0.0268402350 0.2753861864 -0.0557527000 -0.1541427160 0.1919529547 0.1595866681 -0.0960872498 0.0094018325 0.0690050689 0.0035554235 0.0215412725 -0.0686639432 -0.0183674055 0.0637999462 0.0635537730 -0.0434571507 -0.0565201391 0.2599808536 0.0541985953 0.0425921678 0.0610607635 0.0224979080 -0.0403176745 0.1101244127 -0.0194635925 -0.0038994157 -0.0687592127 0.0010660478 0.0396516190 0.0604421314 0.0175898974 -0.0006794838 -0.0769407101 0.0115084827 -0.1555058679 -0.2486081212 -0.0680992038 -0.1124239214 -0.0100167309 -0.0626543486 0.0444009310 0.0087618518 0.0245435629 0.2772292622 -0.0455881247 0.1493768486 0.1412163608 -0.2426964125 0.0970882282 0.0000137529 -0.0007867488 -0.0019755418 -0.0003885422 0.0037597217 0.0056300735 -0.0028118644 0.0042232827 0.0047232518 0.0047546372 -0.0007650001 0.0047404763 -0.0002042831 0.0003369292 -0.0012788863 -0.0033050889 0.0031887894 0.0021678097 0.0063797933 -0.0054665803 -0.0012162276 0.0068625192 0.0012438722 0.0098295320 -0.0001602889 -0.0014727085 -0.0002053753 -0.0024629702 0.0016190510 0.0013823737 0.0005469551 0.0008941045 -0.0001244807 0.0006919736 0.0013705406 -0.0001788696 -0.0001044787 -0.0003501391 0.0000027387 0.0005908363 -0.0006711036 0.0001973697 -0.0003606801 -0.0007462958 -0.0000747508 -0.0001872131 -0.0010205099 -0.0000360674 0.0009148341 0.0015336956 0.0005134536 -0.0011550370 -0.0010478792 -0.0008057032 -0.0006415490 -0.0001365968 0.0000538835 -0.0005833370 0.0006128677 -0.0000931951 0.0007428724 -0.0013829121 -0.0007605836 -0.0011139182 0.0018637766 0.0009835554 0.0000513012 0.0005506659 0.0008246501 0.0025891462 -0.0053455494 -0.0085226319 0.0136479632 0.0124022271 -0.0062500799 -0.0003580322 0.0004102338 0.0016447805 0.0031443676 -0.0039615795 -0.0070883974 -0.0027868894 -0.0052982033 -0.0029297229 0.0002093602 0.0034053862 0.0049075921 -0.0000980928 -0.0018479202 -0.0025767405 -0.0013943231 0.0004962453 -0.0009353731 0.0070306139 0.0162228384 0.0117526148 0.0048580718 0.0011126691 -0.0097020663 -0.0001030097 -0.0019010163 -0.0030731683 -0.0051948974 0.0039789697 0.0042463135 0.0007437352 0.0020980220 0.0107270566 0.0198234823 -0.0005810759 -0.0405572065 0.0021817876 -0.0004877411 -0.0045129542 -0.0008585959 -0.0002358917 0.0012712249 0.0022763655 0.0004679413 -0.0034307701 -0.0010241938 -0.0012020120 -0.0022799400 0.0009844273 0.0015763767 0.0020644409 -0.0022283090 -0.0022632280 -0.0009310386 -0.0124542140 0.0037384456 0.0199744408 -0.0039367751 0.0007227523 -0.0049872285 0.0020258598 -0.0006211775 0.0042675269 0.0051651055 0.0081752640 0.0142713527 0.0062750217 0.0048000633 0.0002157966 -0.0007085880 -0.0007472021 0.0027646782 0.0356909552 0.0300999792 -0.0180655559 -0.0001365883 -0.0001879218 -0.0001818768 0.0173574939 -0.0243506159 -0.0580540004 -0.1012487879 -0.0790487905 -0.0194107325 0.0228938698 0.0557063623 0.0410541169 0.0001424629 -0.0008863880 0.0010344700 -0.0009631479 -0.0022395313 -0.0017081717 0.0016812725 -0.0046995070 0.0012036272 -0.0029596047 -0.0063796453 0.0025807246 0.0351505622 0.0153718711 -0.0070854437 -0.0341506892 0.0091630621 0.0348811851 0.0066404568 0.0033739117 0.0033667255 0.0021697959 -0.0033691236 0.0144271561 -0.0046941581 0.0017512092 0.0038711488 -0.0031253771 0.0157185782 -0.0281192124 -0.0220357219 0.0217618532 0.0089403667 -0.0048275729 -0.0027692019 -0.0009302865 -0.0156569729 0.0020335517 -0.0198351000 0.0101671837 0.0449975822 -0.0302618312 0.0418256660 -0.0029869873 0.0052579138 0.1514899321 0.0315085433 -0.1411640747 0.1983011772 -0.0133739328 -0.1059211548 0.0743212182 -0.1259245383 -0.1975573540 0.0003947471 0.0006901075 0.0005211557 -0.0009384283 -0.0005204111 -0.0001853567 0.0008763129 -0.0000089866 -0.0006442900 -0.0003039364 0.0003780325 0.0008641506 -0.0010612115 -0.0004808350 -0.0000023186 0.0010397736 0.0000783708 -0.0007059548 0.0016309979 0.0008055876 0.0005283921 -0.0011470705 -0.0000715956 0.0012954837 0.0014130466 0.0003123875 -0.0003918765 -0.0001117281 0.0000955110 0.0002767430 -0.0012057869 0.0000273532 0.0013419434 -0.0001542750 0.0001136521 -0.0000482135 0.0003356413 -0.0000726078 0.0004117484 0.0000863998 -0.0001360068 -0.0000995703 -0.0006282192 0.0002181492 -0.0001826152 0.0005432706 -0.0003347759 0.0002720356 -0.0004195017 0.0003414137 0.0000595416 0.0001756149 0.0008041261 -0.0005152479 -0.0016234675 0.0012011928 -0.0000343017 0.0014889322 -0.0001112403 -0.0012447603 -0.0006703478 0.0001980285 -0.0009087217 -0.0002965056 0.0000165864 0.0009720022 -0.0007174957 -0.0002705125 -0.0007337386 0.0005123571 -0.0001604149 0.0011685413 0.0007141006 -0.0009077924 -0.0011016318 -0.0005439932 -0.0005493331 0.0002052301 -0.0001776022 -0.0003980105 0.0000447897 -0.0001839387 0.0002841472 0.0001371982 0.0000416616 -0.0001958924 -0.0000437430 0.0006015574 0.0000893873 -0.0003028499 0.0008995088 0.0008237180 -0.0004093410 0.0003251165 0.0001909364 -0.0001665013 -0.0000848115 -0.0000456714 0.0000481674 0.0000829395 0.0002696242 -0.0000377807 -0.0002550312 0.0007592220 0.0002629981 -0.0000915451 0.0004816257 -0.0000694706 -0.0004137267 0.0005148359 -0.0002191782 -0.0004950439 -0.0005234021 -0.0002580405 0.0004224320 0.0002172807 0.0002288376 0.0018871203 -0.0008537954 0.0012930130 -0.0000800865 -0.0006926064 0.0000679333 -0.0008785834 0.0002218497 -0.0004957054 0.0004782070 0.0000059134 0.0002725350 0.0030089427 -0.0000943230 0.0016174266 0.0009694172 -0.0011273462 0.0006800356 0.0433656431 0.0608822274 0.1050960239 -0.0123320474 -0.1559404545 -0.4389478209 -0.0696850230 -0.3150132874 -0.2339638859 -0.3725577934 -0.1049794353 -0.2685177446 0.0441758524 0.0339243144 0.0049772433 -0.1889014975 -0.1322263490 -0.1000655230 -0.1428768640 -0.0868091558 0.1677610572 -0.1849232494 -0.1592467213 -0.0540008350 -0.0067260214 0.0129104543 0.0046182480 0.0010305593 -0.0067446848 -0.0032353292 0.0063163339 -0.0067914168 -0.0036939375 0.0093034875 0.0056730323 -0.0025162304 -0.0141717962 -0.0077555489 0.0049301053 0.0121310211 -0.0083219740 0.0056645646 -0.0093092464 0.0103220764 -0.0043086709 -0.0077294021 -0.0013958977 -0.0034720792 0.0079867375 0.0012241913 0.0033955507 0.0153375895 -0.0049404312 0.0056236684 -0.0025027399 -0.0004556287 -0.0002173263 0.0024839969 -0.0016400410 -0.0006171982 -0.0000376435 -0.0052010522 -0.0048422124 -0.0031987395 0.0051706621 0.0033122571 -0.0005327904 0.0021162639 0.0085496107 0.1244136131 -0.1109699678 -0.1465914005 0.1111431185 0.0879066660 -0.0644845990 -0.0347324001 -0.0292295074 0.0165059618 -0.0042958438 -0.0276523543 -0.0177775451 0.0058467246 0.0009895299 -0.0055806159 0.0056413658 0.0084102441 0.0024346588 0.0145084846 0.0259537167 0.0118201120 0.0129822583 0.0165292939 -0.0269366395 0.0370766185 0.0721826937 0.0384772516 0.0402970232 -0.0118751306 -0.0826570440 -0.0313768232 -0.0773495935 -0.0547891642 0.0126837700 0.0089689094 0.0069651453 -0.0443973763 0.0073097292 0.0514688454 0.0305291276 -0.0101570524 -0.1518044822 0.0099546344 -0.0010396378 -0.0226226109 0.0050537149 0.0040976937 0.0023312708 0.0078744829 0.0057566122 0.0030915891 -0.0032578321 -0.0075808606 -0.0222253204 -0.0036706055 0.0058944297 0.0329733301 -0.0182461119 -0.0192004146 -0.0250099141 -0.0169348731 0.0072696349 0.0554600760 0.0164939573 0.0206925463 0.0166274666 0.0295869243 0.0096357831 -0.0408661332 0.0458877426 0.0555853222 0.0925864856 0.0533891927 0.0353847972 -0.0050089591 -0.0197581960 -0.0234237638 0.0251201359 0.2953127899 0.3247514394 -0.1956379568 -0.0021777093 0.0015296350 -0.0009344920 0.0261849600 0.0100355099 -0.0011080316 -0.0624240012 -0.0463354667 -0.0098106523 0.0115195720 0.0220498148 0.0157769198 0.0006124008 0.0003746816 0.0003146179 -0.0023021895 -0.0049513622 -0.0029679653 0.0014434162 -0.0046808098 -0.0008955319 -0.0007523467 -0.0045428606 0.0031529477 0.0228641034 0.0115391536 -0.0023596946 -0.0262790721 0.0070739556 0.0266430116 0.0401313629 0.0359659721 0.0256295422 0.0115497075 -0.0044015742 -0.0189069615 -0.0264370355 0.0211058532 0.0357139462 -0.0089338236 0.0093403805 -0.0314301157 -0.0135182602 0.0440490708 0.0145236320 -0.0022147273 -0.0033364377 0.0279485890 -0.0250645345 0.0084725080 -0.0273522808 0.0071044993 0.0446971769 -0.0176159909 0.0276875406 -0.0132401350 -0.0018552260 0.1203334308 0.0256922077 -0.1125881330 0.1575935885 -0.0115685218 -0.0841957384 0.0601536053 -0.1012962932 -0.1578545763 0.0021601527 0.0008906530 0.0011873962 0.0044848372 0.0016524901 -0.0015544231 -0.0050431720 -0.0015988704 0.0008086485 -0.0009801899 0.0004147305 0.0014998766 0.0040031833 0.0019874457 0.0001676212 -0.0019466480 -0.0012934867 -0.0008250561 -0.0049453897 -0.0063768478 -0.0035914373 0.0042002271 -0.0032711185 -0.0065356710 0.0000915324 -0.0003974810 -0.0007647261 -0.0108585459 -0.0070866305 -0.0038284078 -0.0001130717 -0.0016281087 -0.0025865926 -0.0018469026 0.0018660020 0.0007104419 0.0006804906 -0.0009601168 -0.0008791224 0.0010488464 -0.0007503528 0.0001043731 -0.0003541630 0.0007563119 0.0011490676 -0.0007289248 0.0000508551 -0.0009519669 0.0046714815 -0.0050089333 -0.0020897492 0.0043603127 -0.0016391125 0.0013620837 -0.0011746853 0.0009508744 0.0009252894 0.0052140797 -0.0037375028 -0.0010887093 0.0025146003 -0.0019967703 0.0026885477 0.0000207288 0.0000903782 -0.0000205835 0.0001452613 0.0001326947 0.0001766497 0.0000984546 -0.0000210393 0.0000501342 0.0005027646 -0.0006655241 -0.0008643673 -0.0012281016 -0.0066219224 0.0000557400 0.0031475913 0.0043607460 -0.0015399804 0.0092613783 0.0028474871 -0.0049227635 -0.0055905761 -0.0002295479 0.0031524564 -0.0309102314 0.0135001603 0.0182364410 -0.0062003760 0.0005779237 0.0037393262 0.0075714328 -0.0065018897 -0.0053375935 -0.0053867508 0.0024228917 0.0034243542 -0.0364757916 0.0036624371 0.0246201371 -0.0067441163 0.0038788714 0.0044637719 -0.0001766393 0.0015497771 -0.0004886251 0.0012033691 -0.0032688326 0.0008834037 -0.0085732035 -0.0029703014 -0.0050227321 0.0061778817 0.0027452874 0.0033769578 0.0266207473 -0.0070206427 0.0192124877 0.0032598615 -0.0031286029 0.0022304782 -0.0076703797 0.0048433653 -0.0045117919 0.0045778908 -0.0037906708 0.0028189236 0.0247515234 0.0024217429 0.0128781833 0.0037391016 0.0005310371 0.0022261167 -0.0453770171 -0.0377876607 -0.0613793742 0.0343145281 0.0534335335 0.3140841414 0.1206360803 0.2456987148 0.1498306079 0.2720529796 0.0983031637 0.2076412543 0.0381766646 0.0218982715 -0.0132875670 -0.1915851344 -0.0459319873 -0.0258238096 -0.1471991210 -0.0789734047 0.1417232921 -0.1327979610 -0.1691137512 0.0302917700 -0.0681228711 0.1031064424 0.0423975031 -0.0313093400 -0.0443528989 -0.0077761906 0.0684228275 -0.0556508815 -0.0377334601 0.0920764771 0.0739218124 -0.0282845626 -0.1407736025 -0.0699538675 0.0536438687 0.1122111949 -0.1074172885 0.0518208351 -0.0680157378 0.0812490102 -0.0291243509 -0.0766288111 -0.0371404199 -0.0350749639 0.0948569630 0.0788469599 0.0441231110 0.0114189982 -0.0570187032 -0.0156862555 -0.0294998499 -0.0087772041 -0.0129602556 0.0247711994 -0.0160275830 -0.0116123113 -0.0004227144 -0.0013063316 0.0019047420 -0.0003026922 0.0008048439 -0.0017673129 0.0016174365 0.0010738139 -0.0016375087 -0.0018629085 0.0037879973 0.0072039516 0.0053690873 0.0051438735 -0.0018292875 -0.0014334938 -0.0004650337 0.0018013663 -0.0023370788 -0.0018995951 0.0004104600 -0.0003368788 -0.0009411553 -0.0008037054 0.0008858437 0.0004308256 -0.0010033162 0.0010643187 0.0009161702 -0.0003181624 -0.0003437696 -0.0014662467 -0.0012279209 0.0022839510 0.0051206381 0.0033031420 0.0007123241 0.0008291094 -0.0001550105 0.0014121380 0.0010397707 -0.0002187805 -0.0004126555 0.0007008061 0.0021614048 0.0027553839 0.0006008680 -0.0089022834 -0.0085057263 -0.0034231857 0.0319876074 -0.0007570236 -0.0003361683 0.0031000454 -0.0001153386 -0.0002300792 -0.0005332947 -0.0016220728 -0.0008215688 0.0001211112 0.0003869338 0.0010232967 0.0029541707 0.0003299372 -0.0009730365 -0.0044254237 0.0023801154 0.0027368060 0.0034813053 0.0040837651 -0.0022477320 -0.0094084194 -0.0013357930 -0.0015214131 -0.0001334163 -0.0042682181 -0.0011070244 0.0049229493 -0.0068171061 -0.0086382140 -0.0137690179 -0.0091242638 -0.0060630815 0.0008862693 0.0007092358 0.0008111422 0.0003518336 -0.0005115626 0.0064751674 -0.0012771459 -0.0185932279 0.0087756451 0.0019655824 -0.0152902614 -0.0052404967 0.0039514643 0.0300256869 0.0212360507 0.0039566577 -0.0058767499 -0.0112286137 -0.0078824848 0.0000508514 -0.0000387735 -0.0004022468 0.0010840114 0.0015389997 0.0010123893 0.0006061256 0.0008328486 -0.0010700384 0.0005864032 0.0022085330 -0.0010690511 -0.0093884406 -0.0051598677 0.0005269914 0.0122748232 -0.0034256053 -0.0127701527 -0.0121736483 -0.0140557407 -0.0064512783 -0.0090091503 0.0017763873 0.0044208199 0.0074659915 -0.0018484552 -0.0112637744 -0.0067212853 -0.0129556054 0.0036183371 0.0072395714 0.0042933601 0.0003505907 -0.0075135210 0.0031402834 0.0127875151 0.0111965817 -0.0025329014 0.0080870407 -0.0039687041 -0.0203534432 0.0105432338 -0.0157069539 0.0024920096 -0.0011029702 -0.0576119651 -0.0120348365 0.0553313529 -0.0775289719 0.0057823882 0.0413123407 -0.0300310566 0.0495831049 0.0799751083 0.0200657367 0.0067091270 0.0056532060 0.0415028292 0.0168858437 -0.0084120661 -0.0392710496 -0.0140270791 0.0055084329 -0.0082796065 0.0002094978 0.0080252046 0.0378917474 0.0185145838 0.0017887217 -0.0212613325 -0.0107098522 -0.0029492136 -0.0747914082 -0.0656537865 -0.0360130588 0.0140471450 -0.0173359130 -0.0467224472 0.0032454476 -0.0008560866 -0.0001726102 -0.0897859964 -0.0561917085 -0.0332559443 0.0010441605 -0.0143470784 -0.0232958998 -0.0361922586 0.0290129878 -0.0033451345 0.0347123033 -0.0230787389 0.0039602478 0.0083702278 -0.0049148745 0.0027666995 -0.0325230757 0.0279043898 0.0063179238 0.0193793550 -0.0147487130 -0.0019093129 0.0541083552 -0.0780631994 -0.0429662374 -0.0127137825 -0.0113074654 -0.0398090661 -0.0046321678 0.0017584825 -0.0006556770 0.0684522984 -0.0682713135 -0.0387546754 -0.0046936607 -0.0096124336 -0.0228541644 0.0004434067 0.0000948582 -0.0014352892 -0.0014247307 -0.0003411371 -0.0014589020 0.0004170092 -0.0001051526 0.0003566884 0.0013788536 -0.0013269087 -0.0022955917 -0.0151861963 -0.0697283726 0.0012978914 0.0260021322 0.0348308178 -0.0127137215 0.0851421382 0.0335439210 -0.0445134246 -0.0566645763 -0.0078922698 0.0314519456 -0.2771253123 0.1307366531 0.1643487745 -0.0372971971 0.0312066912 0.0261245081 0.0810072193 -0.0582217064 -0.0564785039 -0.0515688385 0.0192011708 0.0323894287 -0.3589919578 0.0446222690 0.2462980231 -0.0729657182 0.0686008244 0.0511272913 -0.0147594263 0.0440919009 -0.0132670960 -0.0057983205 -0.0558990308 0.0004935381 -0.0884048031 -0.0332288976 -0.0519462993 0.0565626076 0.0080630270 0.0323903080 0.3385689828 -0.0815692226 0.2398671448 0.0684448160 0.0095305476 0.0394571453 -0.0749444234 0.0541023804 -0.0446628606 0.0496448519 -0.0247285933 0.0294299458 0.3010581726 0.0256257671 0.1597036597 0.0516555994 -0.0051349704 0.0314693963 0.0184809211 0.0136507486 0.0205927090 -0.0168858128 -0.0109227634 -0.1157887837 -0.0589562823 -0.0895095641 -0.0473630576 -0.0956996355 -0.0410601752 -0.0686267340 -0.0078450685 -0.0042017133 0.0015546904 0.0454829930 0.0186885270 0.0116837725 0.0441059858 0.0193039515 -0.0386720564 0.0397360699 0.0415320127 0.0041089689 0.0054619574 -0.0005207099 -0.0022727568 0.0136389911 -0.0019266669 -0.0059405911 -0.0054893736 0.0016107399 0.0026551415 -0.0072628147 -0.0079641886 0.0032069262 0.0100770095 0.0020903440 -0.0046947690 -0.0047565637 0.0137272401 -0.0019679957 0.0001408030 -0.0017763538 -0.0007415941 0.0052841262 0.0058711853 0.0024299315 -0.0091009734 -0.0185307689 -0.0045936577 0.0272843125 0.0040120121 0.0156613556 0.0024966480 0.0007319652 0.0018027008 -0.0013483429 0.0008277728 0.0017117568 -0.0012222001 -0.0047491218 -0.0056394403 -0.0023467198 0.0038809795 0.0031372290 -0.0006283104 0.0020120288 0.0103555818 0.1403650202 -0.1224859853 -0.1430514669 0.1496147637 0.1197101731 -0.0853042798 -0.0483658140 -0.0397041215 0.0247675038 -0.0139155955 -0.0411219054 -0.0210775119 0.0089776381 0.0021588384 -0.0086666999 0.0093182128 0.0102389095 -0.0011651179 0.0220544275 0.0377226280 0.0153701069 0.0145987589 0.0164952808 -0.0337892541 0.0492090692 0.0924424605 0.0476450220 0.0511025904 -0.0134237582 -0.1050082513 -0.0338694714 -0.0982989417 -0.0696519035 0.0156543580 0.0128894275 0.0152807769 -0.0427793368 0.0134095068 0.0256693667 0.0038547134 -0.0326479010 -0.0437741007 0.0064228166 -0.0044520673 -0.0135511449 0.0034363244 0.0026795669 0.0012888875 0.0038852300 0.0043708469 0.0035570140 -0.0021892780 -0.0049037558 -0.0147541795 -0.0022110902 0.0036404565 0.0212607751 -0.0117835815 -0.0115838308 -0.0164591325 0.0005301876 -0.0029820377 0.0278663613 0.0172524517 0.0188434283 0.0219540077 0.0186326572 0.0091037505 -0.0293093802 0.0296394550 0.0336186136 0.0572254255 0.0347088847 0.0216528789 -0.0031184358 -0.0227183481 -0.0263268505 0.0311742408 0.3688715573 0.4068549083 -0.2447240125 0.0003653599 0.0001946004 -0.0033350085 -0.0520253759 -0.0197244275 0.0144787346 0.0828782963 0.0599916945 0.0140637593 -0.0168713161 -0.0325463936 -0.0235096729 -0.0003131521 -0.0001564296 -0.0006445884 0.0023534997 0.0010311556 0.0011487443 -0.0054157777 0.0080047773 0.0048766747 0.0015463399 0.0079371565 -0.0047482845 -0.0219485931 -0.0141496110 -0.0010907563 0.0341753498 -0.0091571819 -0.0355527690 -0.0053606606 -0.0119627362 -0.0006825358 -0.0227517055 0.0031837097 -0.0105334849 0.0013586648 0.0148077697 -0.0049174103 0.0349876740 0.0129692053 0.0563682480 0.0138563113 -0.0994688055 -0.0299952281 0.0261525957 -0.0015895141 -0.0880771623 0.0461031467 -0.0128526587 0.0367885687 -0.0140848928 -0.0793146008 0.0351606216 -0.0545801341 0.0150147938 -0.0010277432 -0.1645259821 -0.0337360482 0.1586141125 -0.2230118125 0.0150113775 0.1188472530 -0.0868056414 0.1425448363 0.2340357573 -0.0020262783 -0.0006845000 0.0007966925 -0.0009961408 -0.0006910713 -0.0005711457 -0.0004286530 0.0004801588 0.0008606497 0.0013166632 0.0005405173 -0.0000990806 -0.0001900309 -0.0004050361 -0.0005876336 -0.0004127435 -0.0000407194 0.0002814813 0.0056209530 0.0026633582 0.0011882423 0.0054826347 -0.0001385938 -0.0032170754 -0.0036051958 -0.0010959139 -0.0002047380 0.0029009978 0.0011976082 0.0001311408 0.0018866685 -0.0001131132 -0.0017016227 0.0073497378 -0.0047347506 0.0026565032 -0.0090658677 0.0049288956 -0.0032285678 0.0000517017 -0.0005539945 -0.0012251422 0.0092131034 -0.0061477328 0.0016736142 -0.0084274652 0.0052463161 -0.0019022972 -0.0071261914 0.0127587149 0.0092858994 0.0112656983 -0.0015151942 0.0152874970 0.0005452976 -0.0004197748 -0.0009761382 -0.0088358649 0.0111127537 0.0104553635 0.0113540740 -0.0016171826 0.0161477408 0.0006995195 0.0000477481 -0.0017851447 0.0018646633 0.0008141353 0.0019700266 0.0001730638 0.0000340188 0.0006218253 -0.0005681719 0.0007419399 0.0008686560 0.0013311962 0.0032786159 -0.0003774883 0.0000430496 0.0002341024 0.0000413609 -0.0052001475 -0.0026631712 0.0026569360 0.0044011254 0.0020164352 -0.0023148693 0.0125775504 -0.0076377865 -0.0075197632 -0.0013870640 -0.0060495873 0.0000585605 -0.0065618372 0.0030368013 0.0044823482 0.0033078419 -0.0016501603 -0.0021005195 0.0209645879 -0.0035759483 -0.0149007653 0.0050792720 -0.0069871179 -0.0038434723 0.0035751126 -0.0101827019 0.0026290176 0.0038956033 0.0109365833 0.0016121640 0.0054320704 0.0028848968 0.0031799840 -0.0021168256 0.0039760698 -0.0015851698 -0.0366385281 0.0075381116 -0.0250923826 -0.0114229952 -0.0086030842 -0.0057884685 0.0035563085 -0.0047361861 0.0022715806 -0.0033314054 -0.0019531919 -0.0017215807 -0.0316568979 -0.0019476216 -0.0173467037 -0.0060976640 0.0030015030 -0.0038075541 0.0453478579 0.0281979237 0.0378676478 -0.0507328457 0.0095447413 -0.2414070915 -0.1720929271 -0.1857138765 -0.0735726817 -0.1824679279 -0.0986845983 -0.1169531275 0.0162802820 0.0117684761 -0.0089657326 -0.0274581375 0.0236438004 0.0144502697 0.0150616453 -0.0065105272 0.0056796050 0.0064497092 -0.0253747729 0.0474152718 0.0009869764 -0.0076035667 -0.0012914727 -0.0111869872 0.0033870033 0.0065291605 -0.0024296027 0.0013083128 0.0012574580 -0.0015599713 -0.0025890192 -0.0005720723 0.0024604494 0.0065403698 -0.0004361487 -0.0055632626 -0.0067063010 -0.0027418053 0.0025279860 -0.0009582262 0.0016142350 -0.0000845248 0.0022399479 0.0000902807 -0.0002813385 0.0069892581 -0.0007402432 -0.0226024392 0.0054935088 -0.0119471479 0.0022308695 0.0016682753 0.0015179282 -0.0000070456 -0.0002998176 0.0002410281 0.0006119581 -0.0035052916 -0.0032066828 -0.0024929527 0.0042516138 0.0036568400 0.0010036689 0.0018381798 0.0031826892 0.0203252254 -0.0148302867 -0.0188726831 0.0221790492 0.0175641772 -0.0130836422 -0.0081073200 -0.0068374300 0.0038683451 -0.0029312014 -0.0064927981 -0.0028910701 0.0022219376 0.0015388999 -0.0009966943 0.0015697311 0.0011142017 -0.0010487311 0.0038003191 0.0066394410 0.0029749681 0.0020989399 0.0022783824 -0.0047694570 0.0065895012 0.0114313547 0.0048526725 0.0074216659 -0.0022063082 -0.0157429353 -0.0059174402 -0.0166166605 -0.0116207447 0.0041539162 0.0014789934 0.0019959458 -0.0068997945 0.0024591111 0.0002300700 -0.0087518112 -0.0038547872 0.0141437174 -0.0024350371 -0.0028316536 0.0001273532 -0.0029885231 -0.0018028325 0.0008789326 0.0017983423 0.0005670878 -0.0031602833 0.0013010401 0.0014852429 0.0002091571 0.0008316619 0.0008224182 -0.0004805169 0.0012645728 0.0012171254 0.0015006354 0.0002284993 -0.0003842937 0.0017951641 -0.0012535591 -0.0023744662 -0.0051113547 0.0015888334 -0.0055930693 0.0070003728 0.0019689266 0.0020500228 0.0028030096 0.0062160371 0.0049454234 -0.0007789377 -0.0034049705 -0.0040687114 0.0046168252 0.0535635842 0.0633662680 -0.0379617336 0.0012024489 0.0014807148 0.0057600324 -0.0000631636 0.0012870107 0.0000797152 0.0087171590 0.0031120234 -0.0026110540 -0.0019639703 -0.0017464979 -0.0005833685 0.0008549667 -0.0023802261 -0.0015331742 -0.0140840581 0.0122554294 0.0076856934 0.0276898004 -0.0371949798 -0.0289178421 0.0104333038 0.0002491133 0.0109382713 -0.0043053987 -0.0009455153 0.0015818230 0.0033383986 -0.0005511268 -0.0036936564 -0.0697655979 0.0392170892 -0.0738341340 0.1880085652 -0.0017824856 0.0342321271 0.0687773094 -0.1870063756 -0.0550529466 -0.1980467695 -0.0655893323 -0.3187113477 -0.0645052532 0.5776367656 0.1704970588 -0.0866776289 -0.0009294794 0.5368710790 -0.0642572253 0.0521593761 -0.1413563401 -0.0129387262 0.0622775234 0.0591585713 -0.0560576473 -0.1164179423 -0.0606607385 -0.0122104112 -0.0034523156 0.0040094594 -0.0221346704 -0.0078689846 0.0106171301 -0.0043558834 0.0084475380 0.0255509851 -0.0000228707 -0.0004368395 -0.0019650604 -0.0026874302 -0.0005713318 0.0014545897 0.0035113092 0.0008761715 -0.0012031047 -0.0001524690 -0.0006688843 -0.0012740919 -0.0037420492 -0.0011227253 0.0010723930 0.0033599632 0.0011872135 -0.0004577325 0.0036317081 0.0039483582 0.0031053722 -0.0053434001 0.0014997786 0.0067349695 -0.0006673118 0.0000141532 0.0000915398 0.0053650011 0.0039907589 0.0039510764 -0.0039698569 0.0018912719 0.0058838629 -0.0073718339 0.0038340004 -0.0032242658 0.0083380696 -0.0046654951 0.0026668583 -0.0007634127 0.0021458233 0.0036399166 -0.0074185224 0.0038823580 -0.0037781114 0.0088014380 -0.0055387685 0.0018658224 0.0070096322 -0.0108821473 -0.0102105478 -0.0085180355 0.0016180049 -0.0142549544 -0.0003738614 0.0007503780 0.0036163012 0.0048430641 -0.0093819921 -0.0102908474 -0.0195023503 0.0014136679 -0.0209729984 0.0000755169 -0.0000078021 -0.0001885110 0.0005103986 0.0001904539 0.0004632753 -0.0008832867 0.0002211922 -0.0024590317 0.0010787954 -0.0013771944 -0.0014580593 0.0014883686 0.0085559337 0.0002376326 -0.0031304391 -0.0053380615 0.0012511653 -0.0005719331 -0.0019165953 0.0001438063 -0.0002373070 -0.0019985403 -0.0000366853 0.0123435336 -0.0052323370 -0.0076034919 0.0023147252 0.0006949372 -0.0013065002 -0.0009394839 0.0011449696 0.0006670513 0.0009153228 0.0025349316 -0.0003378882 0.0152229616 -0.0026214886 -0.0104883188 0.0033784171 -0.0058778491 -0.0024657047 -0.0014977036 0.0104927152 -0.0012097618 -0.0023801804 -0.0138190932 -0.0010552925 0.0061159496 0.0005380811 0.0036830922 -0.0049533567 -0.0062078684 -0.0023500621 0.0019118045 0.0011668964 0.0003502877 0.0030732409 0.0063158856 0.0009593315 0.0070903177 -0.0005491458 0.0039356999 -0.0037876600 0.0066685145 -0.0025932838 0.0028864254 -0.0005124201 0.0024802938 -0.0002602982 -0.0034726462 0.0000818148 0.0042719788 0.0036235765 0.0079949128 -0.0073960506 -0.0048965278 -0.0388298692 -0.0110535880 -0.0326265847 -0.0220158810 -0.0306572017 -0.0045268339 -0.0296498246 -0.0151377170 -0.0090432585 0.0024677784 0.0419002508 0.0278704338 0.0258717454 0.0668699195 0.0215734791 -0.0606259158 0.0577665779 0.0500431990 0.0260258262 -0.0042462012 0.0823731251 0.0107480025 0.1521077639 -0.0330416981 -0.0854452442 0.0254249010 -0.0052288884 -0.0120166466 0.0141826680 0.0268978819 0.0098645220 -0.0135797784 -0.0804630415 -0.0036418165 0.0326089230 0.1496022612 0.0164426662 0.0048209690 -0.0103350736 -0.0024404523 0.0358997564 -0.0247572843 0.0162344080 -0.0304112797 -0.1583751424 -0.0177574501 0.4046202405 -0.0733342468 0.2121133286 -0.0251867850 -0.0173256105 -0.0091433936 -0.0080322031 0.0123129048 0.0026806951 -0.0039816645 -0.0002742947 0.0004588217 0.0031904380 -0.0033649738 -0.0025155068 0.0040955736 0.0038990265 0.0019973564 -0.0104330290 0.0087640584 0.0169976238 -0.0068166284 -0.0046740637 0.0056139633 0.0031397482 0.0034770423 -0.0003158184 -0.0003603099 0.0018121975 0.0019634555 -0.0017808685 -0.0020494727 -0.0003776610 0.0000977368 0.0001095189 -0.0001923036 -0.0013697811 -0.0034113192 -0.0022078668 -0.0010038392 -0.0021719430 0.0014174908 -0.0007158171 -0.0007840811 0.0013385311 -0.0033351511 0.0023271517 0.0096636344 0.0041644926 0.0115936537 0.0063510592 -0.0021671614 -0.0001852674 0.0002323357 0.0046701257 -0.0012633724 -0.0061235059 -0.0055330559 0.0018305898 0.0194130220 -0.0015623349 -0.0002824742 0.0024140528 -0.0008954704 -0.0007620061 -0.0005377334 -0.0005646279 -0.0006872597 -0.0011594641 0.0006258728 0.0012853879 0.0029887814 0.0003105423 -0.0006544877 -0.0036186806 0.0026505476 0.0027188995 0.0037310190 0.0010306248 -0.0000267286 -0.0066133974 -0.0034130801 -0.0038887573 -0.0052598013 -0.0039931966 -0.0021290960 0.0068226413 -0.0057110264 -0.0068201555 -0.0113685355 -0.0057922400 -0.0034502538 0.0000318478 0.0019461802 0.0024989156 -0.0026044198 -0.0259620350 -0.0276870998 0.0197935365 -0.0123562714 0.0023409932 -0.0438884115 0.0119323200 0.0043046199 -0.0042476144 -0.0099910723 -0.0086927975 -0.0036937306 0.0024739642 0.0052571790 0.0040433361 -0.0001348350 0.0001000968 -0.0001924860 -0.0047517083 0.0074854125 0.0048534031 0.0075157773 -0.0066670175 -0.0092985947 0.0012545307 -0.0051962501 0.0043388342 0.0003611536 0.0017669753 0.0015967895 -0.0051270545 0.0011896903 0.0050205630 -0.0586894401 -0.0086459122 -0.0511173792 0.0754490780 0.0002032412 0.0391819848 0.0483158461 -0.0981536242 -0.0497204992 -0.0575180605 -0.0512097201 -0.0536425587 0.0075878667 0.1278177152 0.0356064712 -0.0475749117 0.0100391167 0.1428217684 -0.0485794978 0.0170313427 -0.0379752871 0.0078020363 0.0666631276 -0.0135361217 0.0280617483 -0.0214402494 -0.0054769857 0.0295789480 0.0061163478 -0.0263652724 0.0340292346 -0.0016834683 -0.0181803717 0.0167219857 -0.0266129741 -0.0386856120 -0.0018991491 0.0061953179 0.0250594444 0.0338799865 0.0069373318 -0.0181543739 -0.0446816571 -0.0107894325 0.0156731565 0.0039805268 0.0090713031 0.0154772905 0.0454557039 0.0134243948 -0.0140649518 -0.0428535114 -0.0147541755 0.0064354315 -0.0436863081 -0.0469764317 -0.0393022943 0.0702433996 -0.0171760798 -0.0875662836 0.0027493690 -0.0018749602 0.0008426354 -0.0597406968 -0.0500547231 -0.0467477752 0.0549903062 -0.0266220435 -0.0757086113 0.0452909997 -0.0219176709 0.0295562845 -0.0683736941 0.0354496964 -0.0275317689 0.0082836132 -0.0167760513 -0.0236245364 0.0679157193 -0.0394216140 0.0241078480 -0.0706577828 0.0434196895 -0.0130393688 -0.0269700017 0.0641732583 0.0665077426 0.1325377140 -0.0206568637 0.1426933988 0.0029548957 0.0005640484 -0.0014621096 -0.0481781397 0.0752434532 0.0844256284 0.1257364955 -0.0001364667 0.1429669070 0.0005591692 0.0003170825 -0.0015282237 -0.0037838161 -0.0010213588 -0.0032115813 0.0007596223 -0.0002967556 0.0019187976 -0.0048545018 0.0041196500 0.0060499549 -0.0216839580 -0.1134516827 -0.0023643169 0.0401919483 0.0750614912 -0.0148480047 -0.0098291044 0.0207766160 0.0074325604 0.0169560107 0.0312982331 -0.0069336203 -0.1252455952 0.0493551612 0.0786442111 -0.0283255285 -0.0216242680 0.0145999093 -0.0055588660 -0.0050071324 0.0036313318 -0.0027062717 -0.0394241303 -0.0015734921 -0.1473602086 0.0274228334 0.1021644707 -0.0304598751 0.0594302638 0.0224497448 0.0232177178 -0.2352526244 0.0221968283 0.0396543727 0.2855539912 0.0161031062 -0.0856437036 0.0095449207 -0.0523088766 0.0700346791 0.1089978093 0.0314414538 -0.1579352644 0.0154484158 -0.0936939367 -0.0624007234 -0.0913951490 -0.0233772026 -0.0975761030 -0.0059045848 -0.0532186308 0.0536133970 -0.1213379360 0.0385773750 -0.1854463002 0.0076089291 -0.1168288618 -0.0250471116 0.0940773908 -0.0209882483 -0.0039759519 -0.0002317765 0.0031022392 0.0058121980 -0.0137177808 0.0019624126 0.0272431503 -0.0039231487 -0.0169513291 -0.0065155889 0.0130742142 -0.0173685813 -0.0206590186 -0.0133341710 0.0057605493 0.0699233886 0.0247870677 0.0211723349 0.0587491678 0.0343488661 -0.0648881821 0.0541310875 0.0648755094 -0.0046098421 -0.0400716062 -0.1608536430 -0.0027188897 -0.4777270232 0.0626741478 0.2469635547 -0.0355697041 -0.0263618497 0.0132753757 0.0153673976 0.0183252270 0.0013772237 -0.0046203392 0.1522389649 0.0187843895 0.0246300001 0.0296408367 0.0111409072 -0.0097680192 0.0390170471 0.0103354275 -0.0041970788 -0.0232733860 -0.0017265507 0.0171299972 -0.0472777114 0.0046384733 0.1931464885 -0.0518050218 0.0936075388 -0.0110312017 -0.0055060778 -0.0060173283 0.0223442689 -0.0279157154 -0.0115719043 0.0019759248 -0.0025662853 0.0019073169 -0.0020300340 0.0035017812 0.0000544835 -0.0013701350 -0.0008711866 -0.0028903908 -0.0058323561 0.0058053240 0.0066937773 -0.0000311673 -0.0000001373 -0.0006793708 -0.0008120862 -0.0009701438 0.0000724882 -0.0010277356 -0.0007053177 0.0001325905 0.0008746984 0.0012706339 0.0006196907 0.0002560521 -0.0006507527 -0.0011237132 0.0003810677 0.0014483776 0.0009789610 0.0000051554 -0.0002432647 -0.0005692808 -0.0011778319 -0.0017937251 -0.0020366317 -0.0007079392 -0.0000050836 -0.0004061172 0.0011778866 -0.0025418797 0.0005489643 -0.0003658299 0.0003463656 0.0004495029 0.0018085606 -0.0008706359 -0.0026806187 -0.0028802221 0.0018487045 0.0066762402 0.0009675947 0.0007553365 0.0007579843 0.0011449875 0.0007648019 -0.0002658117 -0.0011882014 -0.0006569544 0.0005763399 -0.0002919826 -0.0000402571 0.0008041892 -0.0001654719 -0.0004667735 -0.0015740622 0.0003347565 0.0004489833 0.0009682821 0.0005023515 -0.0007204199 -0.0033509357 0.0002272422 -0.0006074472 0.0017251751 -0.0013711187 -0.0015071312 0.0027701631 -0.0032320944 -0.0032479693 -0.0051981715 -0.0053735148 -0.0038218351 0.0010079357 0.0001579330 -0.0000691511 0.0004816207 -0.0006547942 0.0033583673 -0.0026256196 -0.0111346936 0.0064536111 -0.0113053241 -0.0004346148 0.0002504440 0.0011661080 0.0005709849 0.0000799894 -0.0003597870 -0.0001717192 -0.0003942413 -0.0002301233 0.0001389194 0.0001745762 0.0001187265 0.0007464602 0.0006449514 0.0003255790 -0.0011910161 -0.0002923524 0.0007210365 -0.0006567704 0.0001031721 -0.0006356481 0.0000750111 0.0000030006 -0.0000241380 0.0002385304 -0.0001781012 -0.0003174496 -0.0072657574 -0.0101118689 -0.0036017790 -0.0072860528 0.0006755857 0.0060759727 0.0041916130 -0.0003456985 -0.0069688936 0.0078769680 0.0119077112 0.0009753080 -0.0030832323 -0.0055535667 -0.0011743199 0.0098631491 -0.0034053292 -0.0111144617 0.0047940694 -0.0030296748 0.0075893051 0.0002688764 -0.0046656166 -0.0022674610 0.0020591786 0.0060875237 0.0030481212 -0.0015975380 -0.0003220241 0.0021567166 -0.0017155897 0.0008724913 0.0009324005 -0.0013346161 0.0018502493 0.0021305915 0.0211098645 -0.0052240805 -0.0494088475 -0.0450372407 -0.0033845727 0.0344792038 0.0746641085 0.0126949436 -0.0355902410 -0.0168315794 -0.0185708732 -0.0242786772 -0.0776282262 -0.0174437313 0.0341916469 0.0853344394 0.0245802975 -0.0214915851 0.0411212701 0.0545193988 0.0613712198 -0.1580989505 0.0252691963 0.1689117347 -0.0029255812 0.0036516891 -0.0018339892 0.0637707603 0.0695300351 0.0819940697 -0.1377148529 0.0467854675 0.1660978644 0.0022080951 0.0025470503 0.0082141831 -0.0123424953 0.0035448159 -0.0104251991 0.0072048010 -0.0067322114 -0.0036208261 0.0126807230 -0.0042416752 0.0107745722 -0.0196046281 0.0096907112 -0.0081328614 0.0114343674 -0.0080543865 0.0058745996 0.0434946473 -0.0130151257 0.0355658983 -0.0016971525 0.0012795390 -0.0010044625 0.0113086818 -0.0013028015 0.0144115373 0.0476635285 -0.0071650685 0.0452984101 -0.0007064294 -0.0005310513 0.0021896394 0.0069822835 0.0019277011 0.0057766340 0.0005139662 -0.0000891319 0.0011973626 -0.0006603058 0.0005446462 0.0006922370 0.0543554598 0.3183726788 0.0123442579 -0.1029822336 -0.2471623669 0.0263304993 0.1401509285 -0.0379819553 -0.0816028982 -0.1219834947 -0.1167476435 0.0590203493 0.1073517683 -0.0220108516 -0.0803308762 0.0348962316 0.0852099227 -0.0130444102 0.1259320133 -0.0433555167 -0.0804809734 -0.0570237500 0.1629469996 0.0477570086 0.0650212747 -0.0342287519 -0.0308291375 0.0162012925 -0.1298150095 -0.0140305384 0.0006350031 -0.1141751350 0.0025853598 0.0211254547 0.1246936985 0.0100966338 -0.0884651572 -0.0048350386 -0.0520568160 0.0645036339 0.0609567453 0.0325565788 0.0748747035 -0.0271179472 0.0674987087 0.0011210838 -0.0420645633 0.0080399174 -0.0867809973 0.0204844689 -0.0488224989 0.0491753650 -0.0743380367 0.0326580739 0.0361768068 0.0144844818 0.0091989851 0.0122081751 0.0389748864 0.0041910054 -0.0001131308 -0.0001041541 -0.0008043939 0.0009795364 -0.0006241790 0.0011572393 -0.0008133863 0.0026237666 0.0025122052 0.0007237964 -0.0022545703 0.0030773333 0.0003312120 -0.0000687738 0.0000962617 0.0026066368 -0.0003733696 -0.0008459146 -0.0036781294 0.0019371551 0.0011790771 -0.0014282882 0.0006452653 -0.0046015263 -0.0008053530 0.0023248601 0.0005478137 0.0043237832 -0.0001757865 -0.0025357941 0.0019423365 0.0003484734 -0.0008265144 0.0014897659 0.0026935199 -0.0001775298 -0.0015243318 -0.0032728730 0.0004274268 -0.0014941320 0.0066786909 -0.0007539714 0.0039043891 -0.0025467788 0.0018936830 0.0030899482 -0.0026221508 0.0014787137 -0.0015128873 -0.0048806289 -0.0013137334 0.0132920394 -0.0040285799 0.0068516660 -0.0010490740 -0.0006243865 -0.0003312743 -0.0004303871 0.0006483535 -0.0001066289 0.0004145065 0.0001295140 0.0006071267 -0.0001619465 0.0001227877 0.0001464463 0.0008675237 0.0004738666 -0.0019756017 -0.0245918323 0.0242046477 0.0136352737 -0.0424790635 -0.0342496935 0.0237108655 0.0144089095 0.0115650347 -0.0077857089 0.0056896731 0.0141386528 0.0076892967 -0.0028046545 -0.0006750289 0.0029853348 -0.0037743747 -0.0039282508 0.0008551292 -0.0059515108 -0.0092793728 -0.0029367670 -0.0036920550 -0.0043009139 0.0082042530 -0.0140089502 -0.0252654366 -0.0123859846 -0.0135950089 0.0011716776 0.0245345721 0.0055724055 0.0195410743 0.0153879095 -0.0026964859 -0.0057801132 -0.0065132329 0.0076516522 -0.0007999052 -0.0017351017 0.0087219759 0.0025287721 -0.0072487268 -0.0020805009 0.0007879040 0.0026339101 -0.0045229927 -0.0027443902 0.0012881897 0.0016662215 0.0003557446 -0.0028137676 0.0010519903 0.0006370009 0.0010807419 0.0010706934 0.0005301633 -0.0017392486 0.0016739484 0.0013120219 0.0012055633 -0.0026542551 0.0003451382 0.0071225585 -0.0108408963 -0.0063126116 -0.0180178229 0.0009060724 -0.0024374532 0.0032126286 0.0025547443 0.0026990655 0.0028923172 0.0075860951 0.0053739791 -0.0009304089 0.0061244459 0.0071532691 -0.0083980220 -0.1029146067 -0.1150625294 0.0686133940 -0.0003199168 0.0014690055 0.0017408522 -0.0302957272 -0.0069589361 0.0127993854 0.0177514755 0.0142036931 0.0052543114 -0.0057687350 -0.0107200581 -0.0077412420 0.0027452539 -0.0021242235 -0.0003535718 0.0079731087 -0.0268742021 -0.0158176631 0.0007212448 -0.0177239552 0.0032032826 0.0206699095 0.0305113073 0.0012082887 0.0037733051 -0.0021379067 -0.0045583175 0.0093745849 -0.0004856892 -0.0078569109 0.2263985987 0.0959705814 0.1800018560 -0.1770188510 -0.0048819255 -0.1634174575 -0.1726890730 0.3013118960 0.1916240847 0.0032212448 0.1320647757 -0.1578460969 -0.0983985369 0.1639547357 0.0572271416 0.0906261767 -0.0421391337 0.0576741820 0.1363333371 0.0304844996 -0.1480393579 -0.0853474515 -0.2495230288 0.2456727797 -0.3315373770 -0.1757189738 -0.1268290362 -0.0709639601 -0.0171688021 0.0302892185 -0.0649067423 -0.0242433524 0.0328401221 -0.0398419203 0.0615565779 0.0933255594 0.0001633022 0.0003759164 0.0007944597 0.0012464134 0.0002769857 -0.0005107491 -0.0013609814 -0.0004195087 0.0003779749 0.0000354350 0.0002747813 0.0005870610 0.0015418516 0.0004710978 -0.0004432787 -0.0014549199 -0.0004975943 0.0002079256 -0.0026018622 -0.0018024692 -0.0016881911 0.0016451505 -0.0005719387 -0.0025444805 0.0003953558 0.0000292873 0.0000695239 -0.0022093826 -0.0017905124 -0.0015914251 0.0017211126 -0.0009915687 -0.0023825171 -0.0011828294 0.0004511517 -0.0008839194 0.0005273713 -0.0007689676 -0.0007672920 0.0016022898 -0.0000405750 0.0018648700 -0.0008340416 0.0002580773 -0.0005696128 0.0007322939 -0.0009166646 -0.0002528242 0.0016178794 -0.0024425777 -0.0022555081 -0.0006430630 -0.0012494423 -0.0010137339 -0.0060255664 0.0043101160 0.0028524622 0.0007714851 -0.0013187281 -0.0013716323 -0.0013656337 0.0010984026 -0.0034312289 -0.0000329228 0.0000077321 0.0000722274 -0.0002994163 -0.0001032961 -0.0002743273 0.0013904653 -0.0001763751 0.0019135572 0.0031105423 -0.0035118078 -0.0047698665 -0.0013511164 -0.0061381006 -0.0000436937 0.0016456480 0.0037118704 -0.0004865475 -0.0008358399 0.0013479495 0.0005929281 0.0007959894 0.0012949077 -0.0003442764 -0.0049138020 0.0023819834 0.0031693185 -0.0001972230 0.0002195075 0.0001376284 -0.0000303709 0.0000465687 0.0000243519 -0.0000304025 -0.0022096117 -0.0001650713 -0.0075833692 0.0018311893 0.0054831489 -0.0017544708 0.0042234708 0.0013772232 0.0002020208 -0.0134556095 0.0006355750 0.0007891234 0.0159598897 0.0001893359 -0.0050545405 0.0009465744 -0.0031226127 0.0033751991 0.0048340731 0.0015547688 -0.0060574853 0.0010164572 -0.0035084720 -0.0005033853 -0.0010655420 0.0000333906 -0.0050052716 -0.0000303190 -0.0027493708 0.0032984136 -0.0064500306 0.0023000079 -0.0097398170 0.0007876210 -0.0061254111 -0.0012567862 0.0062939013 -0.0011572715 0.0089957829 -0.0014188311 -0.0099355436 -0.0191092954 0.0407224579 -0.0003718450 -0.0716088545 0.0167115932 0.0502242478 0.0267843089 -0.0298678378 0.0515204731 0.0523227173 0.0394220724 -0.0162642444 -0.2223133417 -0.1006016068 -0.0848526135 -0.1210126499 -0.1567155625 0.1886413875 -0.1084421235 -0.1510733334 0.0468938510 -0.0010334946 -0.0000118809 0.0004675616 0.0000131816 0.0011074132 -0.0000757401 0.0019598851 0.0006834431 -0.0008164152 0.0024428483 0.0024291269 -0.0009631333 -0.0020689309 -0.0011738329 0.0008418380 0.0000948615 0.0001000405 -0.0001914439 0.0005591190 -0.0024362315 0.0004427572 0.0010547699 -0.0019376240 0.0004393002 0.0002519436 0.0027380268 0.0007940394 -0.0046077948 -0.0014408221 -0.0019747421 -0.0009455478 -0.0003973350 0.0000325773 -0.0003418901 0.0004731206 -0.0002216657 0.0009748510 -0.0011037445 -0.0003255978 -0.0014479207 0.0016165705 0.0011716589 0.0008468951 0.0009729625 -0.0009134149 -0.0114896071 0.0103625930 0.0026336326 -0.0329475591 -0.0267670577 0.0177946297 0.0110153055 0.0085472577 -0.0063772184 0.0053415018 0.0114124110 0.0057199043 -0.0018776843 0.0000596588 0.0028366875 -0.0032005776 -0.0032481393 0.0008617376 -0.0045884362 -0.0067003255 -0.0015797732 -0.0025237927 -0.0026322707 0.0057774191 -0.0113815058 -0.0199638529 -0.0101143517 -0.0101115841 0.0001287070 0.0173041524 0.0023248003 0.0117976607 0.0100918046 -0.0006619653 -0.0051378720 -0.0060189341 0.0028147792 0.0004197172 0.0025376766 0.0089615404 0.0003660731 -0.0139510223 -0.0032280843 -0.0007459676 0.0014041374 -0.0053454607 -0.0032896787 0.0017760430 0.0033706198 0.0015180012 -0.0029042847 0.0007573221 0.0002959563 -0.0015218178 0.0011594450 0.0014070317 0.0019895835 0.0003616895 -0.0002063341 -0.0016274619 -0.0014727954 0.0011096160 0.0098144183 -0.0051714763 -0.0082930446 -0.0155113973 0.0037624716 -0.0003069126 -0.0000007174 0.0088586875 0.0091128416 0.0130787157 0.0177381017 0.0124580129 -0.0023260420 0.0041397340 0.0045860927 -0.0061019485 -0.0735354163 -0.0835657687 0.0498253099 -0.0005452169 -0.0009759725 -0.0017675311 -0.0227090578 -0.0064887586 0.0106081852 0.0142083716 0.0153229000 0.0080760485 -0.0045909806 -0.0103300727 -0.0084862122 -0.0020031293 0.0008329059 0.0005694702 0.0021337128 0.0322019894 0.0203266076 -0.0051543374 -0.0220688877 0.0150096436 -0.0187031767 0.0017071544 -0.0190607442 0.0019820728 -0.0027487262 -0.0036904104 0.0091931806 -0.0030064404 -0.0091442238 -0.2848454144 -0.1871965303 -0.2081203668 0.0780056691 0.0141748356 0.1910550414 0.2007507958 -0.2715747020 -0.2457243327 0.0747470240 0.2726779905 -0.1931305878 -0.1770171861 0.1127473171 0.0503406471 0.1917759984 -0.0767106562 -0.0751306759 0.1299520411 -0.0949193926 0.2567545572 0.0224658398 -0.1306035348 -0.0997082737 0.0890869370 0.2064736944 0.1072108882 -0.0545642820 -0.0108274140 0.0580342643 -0.0591950461 0.0148589842 0.0325210756 -0.0338701694 0.0525775421 0.0643363523 0.0002705617 -0.0000545567 -0.0004941157 -0.0002100097 0.0000591174 0.0003618637 0.0005523797 0.0000601401 -0.0002938640 -0.0001642837 -0.0002023359 -0.0002369056 -0.0004708141 -0.0000485291 0.0002992336 0.0005547845 0.0002093756 -0.0001151018 -0.0007000634 0.0002673617 0.0001247992 -0.0013777433 0.0000985826 0.0013349834 0.0000277535 0.0000407837 0.0000523691 0.0002887650 0.0003017457 0.0006183059 -0.0010309288 0.0001331096 0.0014284955 0.0042394835 -0.0029076793 0.0003135449 -0.0030516173 0.0023910411 -0.0000221862 0.0005927355 -0.0009756006 -0.0013294626 0.0034111102 -0.0023040470 0.0009172573 -0.0036983499 0.0024727721 -0.0006450507 -0.0081784339 0.0095388925 0.0057836724 0.0005684950 -0.0007812044 0.0060904938 -0.0040434946 0.0014433168 -0.0050292822 -0.0018051453 0.0051338076 0.0035474288 0.0056908297 0.0004200841 0.0069054954 -0.0000084885 -0.0000003824 -0.0000011120 0.0000183075 0.0000075011 0.0000107255 0.0023328079 -0.0003561453 0.0054435501 0.0008588819 -0.0003624702 -0.0006218285 -0.0014418570 -0.0043849568 0.0001943317 0.0007331577 0.0027289825 -0.0000863460 -0.0006607342 0.0009003288 0.0004558107 0.0006579387 0.0007623043 -0.0003106062 -0.0029388938 0.0014611954 0.0018882087 0.0001350534 0.0001792874 -0.0000737807 -0.0001672563 0.0000580424 0.0000960383 0.0000320333 -0.0012652686 -0.0001278663 -0.0038620852 0.0009852125 0.0026964378 -0.0008305506 0.0019436294 0.0006115933 -0.0004220110 -0.0003697834 -0.0002371568 -0.0001181735 0.0023694319 -0.0000932449 -0.0008473793 -0.0007605705 -0.0004605358 0.0009595082 0.0007090465 0.0004942848 0.0007812790 -0.0010422643 0.0004914409 -0.0006299236 -0.0019958160 -0.0001820825 -0.0019424969 -0.0001705460 -0.0010662835 0.0007071320 0.0000101895 0.0003988715 0.0034550721 -0.0006765829 0.0018172478 0.0019533372 -0.0030826394 0.0013106935 0.0048586163 -0.0051811083 -0.0131683831 -0.0217120770 0.0501217904 0.0235539490 -0.0576467164 0.0298037560 0.0544035327 0.0514677293 -0.0100564834 0.0584254789 0.0500133120 0.0355927731 -0.0103735584 -0.1808532043 -0.1072849435 -0.0944127816 -0.1560614150 -0.1251647420 0.1905812877 -0.1272489764 -0.1311747533 -0.0229970440 0.0002417856 0.0004307274 -0.0001058446 0.0002468416 -0.0003977198 -0.0002376541 -0.0002792512 -0.0002608750 0.0001021827 -0.0008805771 -0.0003057439 0.0003093396 0.0003559063 -0.0001361089 -0.0000179846 -0.0003831137 0.0006033183 0.0000064143 0.0016773824 0.0005877852 0.0007552921 -0.0004159423 -0.0008928947 -0.0003013581 0.0003640966 0.0005662802 0.0000102409 0.0012875433 -0.0012448590 0.0005894223 -0.0001099713 -0.0002900391 -0.0007472733 0.0001814193 -0.0003021511 -0.0002271808 -0.0003438410 0.0031596010 0.0028817641 0.0025643872 -0.0034605595 -0.0030360258 -0.0004147552 -0.0013222602 -0.0033048195 -0.0258151846 0.0244469807 0.0180779653 -0.0333157273 -0.0264283587 0.0193990365 0.0117795089 0.0098741354 -0.0057490430 0.0036798748 0.0114201113 0.0070522451 -0.0028186436 -0.0014754860 0.0021746980 -0.0027820795 -0.0032076463 0.0001065426 -0.0046521011 -0.0075064904 -0.0026010472 -0.0030995995 -0.0039005803 0.0056030011 -0.0106028834 -0.0177600306 -0.0079258313 -0.0112303364 0.0013485872 0.0210094499 0.0058407860 0.0181285757 0.0137797706 -0.0046570465 -0.0041809649 -0.0042096145 0.0097077125 -0.0014586958 -0.0040305907 0.0095779511 0.0025866760 -0.0067448250 0.0019102705 0.0028586957 0.0006496142 0.0016550179 0.0011339466 -0.0006863474 -0.0026110728 -0.0011223321 0.0021058131 0.0002066256 -0.0008743751 0.0018770102 -0.0006326323 -0.0011352927 -0.0024997285 0.0004346751 0.0008345669 0.0015459839 0.0012561557 -0.0020495833 -0.0040245678 -0.0091321364 0.0096341726 -0.0026008367 -0.0022791317 0.0003882678 -0.0018014104 -0.0046281579 -0.0064337309 -0.0084714386 -0.0100798655 -0.0071657893 0.0013628958 0.0053431111 0.0062690548 -0.0067491057 -0.0807960940 -0.0946080347 0.0567157028 0.0017905643 -0.0001854189 0.0020146473 -0.0348893287 -0.0126232773 0.0157113758 0.0269835900 0.0189414611 0.0035044014 -0.0061350515 -0.0123488213 -0.0089453777 -0.0010086469 -0.0006695250 0.0001638059 -0.0273292584 0.0008259242 0.0033361396 0.0049042142 0.0245035363 -0.0149169120 0.0059838735 -0.0244670186 0.0196195343 -0.0013174770 -0.0041664858 -0.0051654624 0.0136832083 -0.0062891555 -0.0202816409 0.0384245848 0.2112667209 -0.0292857285 0.3195577506 -0.0141493573 -0.0558676401 0.0099221542 -0.1928750591 0.0431466623 -0.0666711877 -0.2653786187 0.1982437543 0.1681409585 -0.1274960872 -0.0557246778 -0.1773473451 0.0749048829 0.0648046693 -0.2681386848 0.0856167613 -0.1617002302 0.0404528002 0.3491990243 -0.0742312594 0.1591437303 -0.0908608239 -0.0204489191 -0.0376677479 0.0005802911 0.1159189766 -0.1405770695 0.0494648025 0.0767173358 -0.0232455260 0.0390309595 0.1276130764 -0.0001603988 0.0000979246 0.0004609136 0.0004808919 0.0000405091 -0.0002443208 -0.0005341476 -0.0001495553 0.0002150936 0.0002441711 0.0001756846 0.0002337361 0.0008459763 0.0001870755 -0.0003216305 -0.0008826936 -0.0002709942 0.0002382431 -0.0012392534 -0.0007355597 -0.0008029846 0.0010392920 -0.0000373823 -0.0015068040 -0.0004922405 -0.0001055552 0.0002484640 -0.0007018495 -0.0004268528 -0.0009051856 0.0009903895 -0.0002519199 -0.0015574605 -0.0019491381 0.0011461548 -0.0001708311 0.0019557552 -0.0011928707 -0.0000786241 -0.0063975239 0.0038813107 -0.0002138337 -0.0015378807 0.0007884157 -0.0000875858 0.0008195783 -0.0012309446 -0.0008733000 0.0069847867 -0.0079680760 -0.0040365091 -0.0038815971 0.0007051585 -0.0061277030 0.0289898328 -0.0174799951 0.0047717298 -0.0005073347 0.0031038295 -0.0007568914 0.0044149049 -0.0018288252 0.0012439424 0.0001592429 -0.0000135363 -0.0004307840 0.0001538292 0.0000349669 0.0001695600 -0.0102254544 0.0016300017 -0.0198853844 -0.0118622588 0.0117741237 0.0159820886 0.0003660018 0.0006665532 -0.0000998199 0.0000311615 -0.0006104881 -0.0000805811 0.0000882890 0.0000394329 -0.0000472113 -0.0002728472 -0.0002561690 0.0001320724 0.0007431407 -0.0001011271 -0.0004945577 0.0005121631 0.0007717276 -0.0002532729 0.0003030139 0.0000112519 -0.0002169276 -0.0000433532 0.0000547864 0.0000305162 -0.0005695864 0.0002000555 0.0006600950 -0.0002761469 0.0008758899 0.0002216223 0.0001610190 -0.0027275857 0.0001880520 -0.0005452513 0.0020333899 -0.0002282562 -0.0023545426 0.0007319960 -0.0014958871 0.0005507139 0.0000868448 0.0003140622 0.0045255833 0.0001276624 0.0031743718 0.0033760028 0.0043858490 0.0016555080 -0.0008440634 0.0009959755 -0.0005276613 0.0014340060 -0.0021208684 0.0009442348 -0.0014860350 0.0012864896 -0.0009593305 -0.0011582157 0.0052954130 -0.0009781261 0.0103868521 0.0001227963 -0.0114021194 -0.0157455978 0.0405170984 0.0005252698 -0.0802735667 0.0195652398 0.0558971455 0.0260622868 -0.0396917535 0.0610279658 0.0645956671 0.0393945918 -0.0181415537 -0.2163761202 -0.0583273324 -0.0446930406 -0.1908133312 -0.0816373058 0.1877238029 -0.1860847215 -0.2258974018 0.0241517113 -0.0002792876 -0.0007092049 0.0001874589 -0.0022065199 0.0007426571 0.0013593655 0.0007878232 0.0000946103 -0.0004016168 0.0021202380 0.0000925054 -0.0007669128 -0.0014404753 0.0006219074 0.0006397831 0.0055361435 -0.0025522740 0.0025019174 -0.0050104288 0.0009877898 -0.0023315590 -0.0025226149 -0.0006252251 -0.0015013278 0.0019751601 0.0045651443 0.0027484019 -0.0082341899 -0.0002576724 -0.0034275941 -0.0019032396 -0.0011078021 -0.0002762589 -0.0000759033 -0.0000555630 -0.0002002789 0.0008350241 -0.0001067635 -0.0000770710 -0.0010199052 0.0002833151 0.0003240259 -0.0006762282 -0.0003009258 -0.0001896752 0.0039171037 -0.0057964465 -0.0009993939 0.0047989308 0.0038030619 -0.0027436591 -0.0013789157 -0.0011567156 0.0006926767 -0.0001949913 -0.0015105533 -0.0012318570 0.0002204816 -0.0001250999 -0.0005027679 0.0002966922 0.0006675211 0.0004846031 0.0004721351 0.0006336792 0.0000531660 0.0002685295 0.0007127136 -0.0005169786 0.0016560404 0.0028106193 0.0013866615 0.0017225602 -0.0001236869 -0.0031216236 -0.0005335536 -0.0020945172 -0.0016535717 0.0007586162 0.0006831758 0.0000926186 -0.0016721909 0.0001509894 0.0025635539 -0.0002839604 0.0015682084 -0.0047402965 -0.0010909389 -0.0011180201 -0.0007009526 -0.0001231062 -0.0003046287 -0.0002210120 0.0010277936 0.0005312115 0.0001060196 -0.0004976215 0.0003542171 -0.0007408830 0.0000671653 0.0003054919 0.0015844090 -0.0003440580 -0.0006639891 -0.0011867492 0.0000698208 0.0013368523 0.0006826673 0.0086291712 -0.0062042719 0.0053607705 0.0012071145 0.0017148159 -0.0025332084 0.0013927424 0.0027484587 0.0027508790 0.0038620021 0.0023877301 -0.0009640916 -0.0007894520 -0.0008403090 0.0009500890 0.0140498655 0.0122177986 -0.0079603872 -0.0000100601 -0.0045977915 -0.0080088289 0.0086781533 -0.0004246073 -0.0049023045 -0.0085689586 -0.0060483771 -0.0018778919 0.0024840760 0.0043846938 0.0026081569 -0.0013758450 0.0031237069 0.0053068860 -0.0296045774 0.0132037396 0.0089719237 -0.0151816531 -0.0021042690 0.0206669367 0.0313648817 0.0191254833 0.0134968055 0.0015566891 0.0021707793 0.0012004120 -0.0058506483 0.0050762575 0.0089411268 -0.0752059463 0.1463393691 -0.1159009019 0.3885016833 -0.0124762631 0.0408619060 0.0947735357 -0.3304508152 -0.0546679418 0.1451811821 0.2269212848 -0.0003552231 -0.1016192040 -0.1593379795 -0.0367160603 0.1722202988 -0.0554956247 -0.2791346461 -0.0059367444 0.0945708417 -0.3059277088 -0.0858324157 -0.0774636848 0.2750440275 -0.3276323394 -0.2839881332 -0.1742913337 0.0143817137 -0.0016285675 -0.0728532653 0.0462537556 -0.0524667827 -0.0278576223 0.0142476533 -0.0216046220 -0.0263613823 -0.0000277018 -0.0006612242 -0.0013097549 -0.0014448809 -0.0001567732 0.0008892510 0.0018159110 0.0005131128 -0.0005527356 -0.0001610212 -0.0005361799 -0.0009508787 -0.0019855563 -0.0004931254 0.0007779512 0.0020809915 0.0007498085 -0.0003773477 0.0021902226 0.0020554962 0.0019878993 -0.0029147735 0.0005127763 0.0039895145 -0.0006435261 -0.0000718012 -0.0000890504 0.0022692629 0.0020166105 0.0021780164 -0.0027246601 0.0010996814 0.0038766958 0.0085657154 -0.0042323464 0.0041999202 -0.0078608202 0.0055511916 -0.0010992178 -0.0052202413 -0.0001056182 -0.0076617668 0.0092253538 -0.0049149574 0.0042454105 -0.0093661094 0.0067909040 -0.0009385591 -0.0077369321 0.0129662912 0.0120303496 0.0053658016 -0.0009550931 0.0142541775 0.0229987463 -0.0149815357 -0.0003184598 -0.0109835516 0.0161573112 0.0144602466 0.0201330553 -0.0016322912 0.0244775606 0.0000763373 -0.0000121214 -0.0001525402 0.0004861963 0.0001738232 0.0004260050 -0.0068712532 0.0011419588 -0.0123768760 -0.0108186327 0.0111072895 0.0144915264 -0.0010480079 -0.0002377235 0.0005029721 0.0001198486 0.0006007569 -0.0000607185 0.0004305344 -0.0002811954 -0.0002679326 0.0002246890 -0.0000058282 -0.0001291505 -0.0014670338 0.0001349360 0.0008268301 -0.0009567338 -0.0015306544 0.0004285151 -0.0003533029 -0.0004933164 0.0001642168 -0.0002596264 0.0009157729 0.0002289645 0.0007546574 -0.0007926832 -0.0006637971 0.0008097840 -0.0034062300 -0.0007666886 0.0000570380 0.0084819838 -0.0003612130 0.0006417770 -0.0074913380 0.0005054254 0.0009507730 -0.0020847726 0.0007157473 0.0002606104 -0.0010550474 0.0002347394 0.0073279646 -0.0029124669 0.0048660259 -0.0014122302 -0.0040630895 -0.0005478210 -0.0006087910 0.0001867336 -0.0003587092 -0.0006899798 0.0031490813 -0.0006011833 0.0122483357 -0.0012578603 0.0070030057 0.0034500302 -0.0079154750 0.0024865069 -0.0044720993 0.0011057120 0.0025769502 0.0187752033 -0.0235368688 0.0155955827 0.0407921520 0.0027627816 -0.0185725702 -0.0120461557 0.0087818824 -0.0185716305 -0.0105921744 -0.0142241719 0.0042353622 0.0785345065 0.0613914593 0.0551285766 0.0025398627 0.1027681632 -0.0683413917 -0.0101193567 0.0033501739 -0.0261485974 -0.0003617900 -0.0008712285 0.0004844210 -0.0029128147 0.0007225382 0.0020015147 0.0002697044 0.0001080383 -0.0001561719 0.0030225838 0.0001125899 -0.0002019555 -0.0004753489 0.0006577322 -0.0000809537 0.0184038897 -0.0043008078 0.0081332081 -0.0197202630 0.0020877945 -0.0096381954 -0.0061680231 0.0032644639 -0.0033668034 0.0018872553 0.0039805528 0.0067475385 -0.0086856760 0.0031683291 -0.0012857827 -0.0036074463 -0.0020150517 -0.0017558862 -0.0002805766 0.0005201625 -0.0001069844 -0.0008865872 -0.0009764778 0.0001157887 0.0003601173 0.0002445156 -0.0000994245 0.0011518172 0.0011397327 0.0005210175 0.0059366511 -0.0065996257 -0.0081162745 -0.0053409461 -0.0045451862 0.0024264619 0.0017176671 0.0010911717 -0.0013348960 0.0015529266 0.0017826578 0.0005612459 -0.0001679712 0.0004153739 0.0007654120 -0.0007200757 -0.0005305221 0.0005008362 -0.0007840022 -0.0008245682 0.0000588432 0.0000513763 -0.0000832475 0.0007846174 -0.0020104758 -0.0036561229 -0.0019032430 -0.0012773455 -0.0004169099 0.0014834098 -0.0004568242 -0.0001212434 0.0007061294 0.0010803647 -0.0011116517 -0.0013568346 -0.0023155238 0.0009598877 0.0028664554 0.0028207912 -0.0037986483 -0.0045226003 -0.0017060870 -0.0008579994 0.0006012162 -0.0027135530 -0.0016176676 0.0013779683 0.0022484914 0.0013855270 -0.0005866117 0.0001773411 -0.0006260977 -0.0026386716 0.0007752239 0.0011843925 0.0026842493 -0.0008662691 -0.0014500500 -0.0033212864 -0.0003505396 0.0013034994 0.0064688516 -0.0006585414 0.0004451952 -0.0037123978 0.0034080079 0.0016014555 -0.0024236770 0.0077162794 0.0085197079 0.0119907621 0.0129772505 0.0091573163 -0.0013432894 0.0002639023 0.0001884795 -0.0008582946 -0.0122028931 -0.0109524138 0.0069574409 -0.0041733324 -0.0146996620 -0.0329789633 -0.0001907406 0.0023036920 0.0001712315 0.0048961313 0.0084501400 0.0070251874 -0.0028694598 -0.0049027651 -0.0055240951 0.0038219838 -0.0010598497 0.0039322731 0.0341527014 0.0116260339 0.0033969964 -0.0045912902 -0.0047993579 0.0067158891 0.0183198686 -0.0219087461 0.0310507819 -0.0031464208 -0.0006883879 -0.0011484756 0.0013657981 0.0011949464 -0.0071065818 -0.1546657784 -0.3479869018 -0.0335372249 -0.3907846995 0.0253555728 0.1423001953 0.0612358868 0.1554340970 -0.1536980989 0.0423165607 0.1077080075 -0.0492064947 -0.0593289953 0.0048299233 0.0068769078 0.0854921260 -0.0310067388 -0.0595854045 -0.3273278609 0.1498837499 -0.3538629458 0.0111802735 0.4050385163 0.0259879558 0.0624933279 -0.2526360522 -0.1096930308 0.0357055020 0.0139696833 0.0144741652 -0.0652145435 -0.0021835069 0.0325905856 0.0293031165 -0.0380422834 0.0560948088 0.0001020939 -0.0019487483 -0.0035250281 -0.0039271370 -0.0006822144 0.0020349754 0.0043724034 0.0014498346 -0.0008796915 -0.0004540750 -0.0014446472 -0.0025147260 -0.0043372809 -0.0011168418 0.0015995012 0.0041424758 0.0018454491 -0.0001969671 0.0061772115 0.0058203911 0.0048717305 -0.0055709997 0.0018670184 0.0084660323 0.0007471538 0.0004812336 -0.0004622179 0.0060680486 0.0051668057 0.0048695488 -0.0055002162 0.0023012566 0.0087017843 0.0334147566 -0.0169404807 0.0159398328 -0.0351441093 0.0235547963 -0.0041234351 0.0067937970 -0.0155199446 -0.0229608446 0.0336438176 -0.0194377576 0.0113110832 -0.0310685583 0.0248477258 0.0019139614 -0.0440249222 0.0637838404 0.0531477772 0.0499091132 -0.0003662992 0.0725740201 -0.0346681970 0.0216683385 -0.0106096434 -0.0358070945 0.0467251780 0.0464710905 0.0456488438 0.0042765133 0.0688968195 -0.0004180999 -0.0000513187 0.0010020350 -0.0000570808 -0.0000733163 -0.0001208383 0.0149625754 -0.0027114561 0.0289185611 0.0117478614 -0.0116690161 -0.0155083925 -0.0013946551 0.0012309010 0.0008061608 -0.0005362455 -0.0005024133 0.0000150390 0.0027657780 -0.0009330013 -0.0016250539 -0.0005814157 0.0000381753 0.0003404298 -0.0062907354 0.0012351594 0.0033889871 -0.0037782997 -0.0038229352 0.0018113090 0.0010611257 -0.0016003416 -0.0006978921 -0.0013538579 0.0024512338 0.0009955949 0.0009394302 -0.0016649250 -0.0015063145 0.0006340092 -0.0061178148 -0.0008731956 0.0003542513 0.0279456541 -0.0008977048 0.0051906103 -0.0233555659 0.0027355293 0.0095865409 -0.0071092552 0.0063368662 -0.0008867573 -0.0017732663 -0.0003934814 0.0000649255 -0.0070000718 -0.0005443844 -0.0154461197 -0.0249099535 -0.0071154131 0.0018294830 -0.0030313522 0.0011697652 -0.0067948263 0.0133948895 -0.0047168236 0.0289316465 -0.0068898826 0.0170073096 0.0098285064 -0.0328574647 0.0077202847 0.0025079991 -0.0036674609 -0.0011476768 -0.0285512500 0.0349762509 -0.0096555714 -0.0313759990 -0.0094610718 0.0088127109 0.0245352276 0.0150424106 0.0070188644 -0.0020208684 0.0073935844 0.0028019468 -0.0203593005 -0.0741069108 -0.0722612833 0.0162006270 -0.0929362372 0.0493611157 0.0403489402 0.0604483498 -0.0235482766 0.0034713337 -0.0181206295 -0.0231395401 -0.0268717578 0.0001010923 0.0018066774 -0.0272126945 -0.0012469166 0.0148946277 -0.0775762810 0.0119880448 0.0351925392 0.0728526423 -0.0096276759 -0.0314044658 -0.0384108205 0.0026132024 -0.0160312434 0.0477708273 -0.0046754801 0.0189396745 0.0134034613 -0.0054624548 0.0078423601 -0.0020198804 -0.0045168698 -0.0137645755 0.0030040133 -0.0030508008 -0.0066270024 0.0065444945 0.0038961593 0.0039843241 -0.0110626064 0.0122871226 0.0065870664 -0.0006369679 0.0025373683 -0.0023259308 0.0009541041 -0.0021164007 0.0003413146 0.0001610134 -0.0003111286 0.0017463023 0.0198579283 -0.0167826987 -0.0262345015 0.0001895572 -0.0002349849 -0.0000494722 0.0006101533 0.0004855590 -0.0005048761 0.0024297099 0.0010421974 -0.0006078191 -0.0006729509 -0.0007758755 -0.0002830212 -0.0006363899 0.0008544766 0.0019766456 -0.0003808641 -0.0015660564 -0.0006565881 0.0007683000 0.0013351466 0.0004176393 0.0010272708 0.0015973565 0.0017380438 0.0017340216 -0.0008377690 -0.0019007730 -0.0039346303 -0.0009502902 -0.0031648183 0.0031929981 -0.0008941363 -0.0011535582 -0.0071050943 0.0024954278 0.0076695738 0.0032248067 -0.0033099483 -0.0142918870 -0.0026148586 -0.0022797129 -0.0015287047 -0.0025878153 -0.0016285177 0.0011131009 0.0031879849 0.0021631552 0.0001441258 0.0002694690 -0.0005067453 -0.0041471513 0.0005479101 0.0016179919 0.0054072730 -0.0018386844 -0.0024812179 -0.0051085644 0.0000670271 0.0028831697 0.0075691334 0.0055344684 0.0025601619 0.0027525302 0.0056661571 0.0041990996 -0.0087666247 0.0106590082 0.0111942291 0.0167766222 0.0164621070 0.0115821878 -0.0023903905 -0.0007873300 -0.0008759328 0.0000188986 0.0013258522 0.0011747749 -0.0002478500 0.0047334275 0.0364134233 0.0750296206 0.0017336984 0.0004632274 -0.0019791176 0.0009357326 0.0035731294 0.0037542420 -0.0008494654 -0.0015657391 -0.0021990261 0.0011360492 0.0001492989 0.0025303599 0.0109347083 0.0088349611 0.0034225894 -0.0054430240 -0.0014155587 0.0088787528 0.0096397119 -0.0069750017 0.0129740268 -0.0014733544 -0.0001654242 -0.0002495100 -0.0000580822 0.0013853992 -0.0017731506 -0.0934493550 -0.1435063185 -0.0414743462 -0.1115041246 0.0099739761 0.0807100361 0.0506836927 0.0057721512 -0.0872020522 0.0528346903 0.0972014530 -0.0161674379 -0.0496581722 -0.0487946306 -0.0094067428 0.0747920840 -0.0248128223 -0.1045386002 -0.1277350548 0.0657844959 -0.1621075281 -0.0030639360 0.1512587837 0.0333632269 -0.0027638960 -0.1210879624 -0.0568611241 0.0164367143 0.0053806094 -0.0052015640 -0.0208960719 -0.0098592515 0.0096279006 0.0146582323 -0.0190311702 0.0198376407 0.0056872742 0.0664243249 0.1111943847 0.1221679883 0.0199299134 -0.0656099400 -0.1347878653 -0.0465652927 0.0241656531 0.0065275312 0.0464538019 0.0865017510 0.1326826370 0.0336085134 -0.0497852136 -0.1275116710 -0.0581310212 0.0035181778 -0.1875846485 -0.1810180731 -0.1532252640 0.1670165037 -0.0611364497 -0.2593171443 0.0122966858 -0.0064235458 0.0050932608 -0.1997018172 -0.1650212535 -0.1548836368 0.1615737016 -0.0777139412 -0.2598763489 -0.0725477889 0.0351417903 -0.0390732837 0.0777610522 -0.0523076856 0.0103965827 0.0059408146 0.0237456519 0.0575142843 -0.0783025613 0.0450105214 -0.0272435291 0.0723662986 -0.0567892677 -0.0024905865 0.0809006863 -0.1268012495 -0.1141561304 -0.1091612924 0.0014217724 -0.1576755773 -0.0187657217 0.0077923606 -0.0000067600 0.0917616607 -0.1191881850 -0.1129923369 -0.1199626444 -0.0041587568 -0.1698866153 0.0040550347 0.0014732822 -0.0088942719 -0.0155198960 -0.0041517119 -0.0123013868 0.0014295856 0.0002523403 0.0033185482 0.0126214681 -0.0109208208 -0.0148405890 0.0473760016 0.0704729449 -0.0149784522 -0.0297005392 -0.0930857777 0.0060573983 0.0018809738 0.0094467792 0.0000133030 -0.0345321380 -0.0355903429 0.0164155584 0.1183757943 -0.0145271916 -0.0697668275 0.0759561377 0.1040867565 -0.0339383062 0.0354231072 0.0171521249 -0.0199413459 0.0033103167 0.0007377647 -0.0017947062 0.0168931064 0.0249591949 -0.0050669776 -0.0229702490 0.1117619386 0.0236383730 -0.0017665717 -0.0479731432 0.0017364084 -0.0172286327 0.0377194216 -0.0088746941 -0.0131898238 0.0175985488 -0.0096476569 -0.0060748662 -0.0053303175 -0.0029782307 0.0092946242 0.0170561349 0.0084811736 0.0407888480 0.0689706244 0.0181765204 0.0066454217 0.0063130153 0.0032889172 0.0109071253 -0.0224251173 0.0076174631 -0.0682743199 0.0160990990 -0.0389586361 -0.0244869591 0.0757208187 -0.0189173085 0.0006211660 -0.0013450268 0.0006551985 -0.0110287028 0.0130065883 -0.0031714825 -0.0074808672 -0.0065932717 -0.0013133581 0.0085293012 0.0103211615 -0.0027172613 -0.0026922983 0.0006361208 0.0018685156 0.0039636582 -0.0193666563 -0.0196012511 0.0077064415 -0.0208889575 0.0084679954 0.0148057501 0.0250668121 -0.0131336685 -0.0068484873 0.0175622916 0.0186314171 0.0312742492 -0.0024632441 -0.0095566026 0.0232028001 0.0005576918 -0.0122573449 0.0490405540 0.0014527700 -0.0274421837 -0.0585079510 0.0041741848 0.0268231468 -0.0724937755 0.0148781064 -0.0341262199 0.0621292016 -0.0204325720 0.0343839460 0.0287522102 -0.0101622954 0.0156019033 -0.0133829252 -0.0139728483 -0.0256011922 0.0259155451 -0.0077218291 0.0039754055 0.0189271253 0.0107274225 0.0073219810 0.0116013651 -0.0128148752 -0.0048926133 0.0034484331 -0.0004369284 -0.0005458295 -0.0037638483 0.0036144547 0.0023925977 -0.0039798334 -0.0032801887 -0.0017675927 0.0078390687 -0.0080474327 -0.0093029059 0.0060548943 0.0038533252 -0.0057132384 -0.0033151371 -0.0039020328 0.0000701718 -0.0000941419 -0.0025834719 -0.0026649199 0.0024245802 0.0029845314 0.0006277681 -0.0001180052 -0.0002429949 0.0001770022 0.0015699045 0.0039355142 0.0022864314 0.0002429675 0.0014410202 -0.0004574788 -0.0003433903 -0.0019069586 -0.0036754186 0.0030135669 -0.0022515633 -0.0097516141 -0.0031464772 -0.0116550417 -0.0059277685 0.0029419166 0.0002555197 -0.0003754407 -0.0046267394 0.0012842448 0.0043442350 0.0011216315 -0.0026256427 -0.0072163647 -0.0005645773 -0.0009600532 -0.0008399500 -0.0005438834 -0.0002484725 0.0009647017 0.0013686680 0.0009522349 0.0002625627 -0.0003909143 -0.0006030374 -0.0026382529 0.0004188265 0.0008546646 0.0025951719 -0.0016126944 -0.0019557170 -0.0032600626 0.0003739329 0.0005133758 0.0039867286 0.0060739044 0.0000107268 0.0056019815 0.0031866493 0.0013939257 -0.0027428478 0.0055800855 0.0070129233 0.0099807632 0.0083639221 0.0056507731 -0.0003743474 -0.0016068089 -0.0022344101 0.0023007718 0.0228847265 0.0267267037 -0.0189280479 0.0081396287 0.0507426773 0.1072543072 0.0015006197 0.0005885468 -0.0008030425 0.0028596978 0.0041674213 0.0029907170 -0.0011213983 -0.0020374121 -0.0025530363 0.0012118322 -0.0008459266 0.0033924165 0.0114621292 0.0071559710 0.0015378735 -0.0081990079 -0.0032907127 0.0129244522 0.0089631206 -0.0132993012 0.0165608081 -0.0024644493 -0.0004477662 -0.0002918027 0.0010126817 0.0005474415 -0.0044069654 -0.0743829550 -0.1376599917 -0.0252573897 -0.1242730619 0.0097615032 0.0702110951 0.0364034240 0.0273065704 -0.0699182360 0.0784124751 0.1527799285 -0.0331552647 -0.0795509012 -0.0594037402 -0.0097322720 0.1180206973 -0.0400178045 -0.1481485847 -0.1892760796 0.0811404469 -0.1857173231 0.0097675453 0.2371093835 0.0030502700 0.0526941836 -0.1305404397 -0.0546331537 0.0206891096 0.0080072545 0.0090749894 -0.0377422673 -0.0005730387 0.0187343623 0.0171480279 -0.0220293931 0.0317709288 -0.0026859354 -0.0431527964 -0.0732837669 -0.0789038550 -0.0123972654 0.0431461557 0.0876727928 0.0301227832 -0.0160451115 -0.0052230173 -0.0308539726 -0.0568147820 -0.0861321373 -0.0213654622 0.0331794035 0.0837749681 0.0378578625 -0.0026819819 0.1193039598 0.1168210341 0.0992853505 -0.1109983931 0.0397100395 0.1703090743 -0.0066921282 0.0045582668 -0.0037180835 0.1276403809 0.1067022212 0.1009924236 -0.1069318383 0.0516656158 0.1701722169 -0.1015517903 0.0483781210 -0.0560217742 0.1097538934 -0.0735515183 0.0151816546 0.0067216999 0.0350769925 0.0820244007 -0.1098387170 0.0624191621 -0.0397454753 0.1030454428 -0.0804129669 -0.0029434822 0.1099836645 -0.1759795117 -0.1599527466 -0.1581756991 0.0031671641 -0.2249105895 -0.0230450696 0.0089989985 0.0016014307 0.1252580223 -0.1653709828 -0.1588395554 -0.1725394643 -0.0064642810 -0.2412968852 -0.0029961285 -0.0009957551 0.0066203689 0.0096171315 0.0024991349 0.0075358924 0.0006473286 0.0006397015 0.0019124194 0.0166677707 -0.0143390570 -0.0195741554 -0.0296869989 -0.0670492427 0.0067342371 0.0232915780 0.0754467690 -0.0032733952 -0.0108413487 0.0005845632 0.0059628876 0.0252002964 0.0268509441 -0.0119281597 -0.0729001241 0.0132325843 0.0447577351 -0.0384058113 -0.0533488147 0.0171250689 -0.0247885758 -0.0063214583 0.0140864524 0.0019365860 -0.0152424615 -0.0024581802 -0.0398275272 -0.0044485023 0.0262590786 0.0067871696 -0.0380236599 -0.0076417910 -0.0030904220 -0.0951207658 0.0014894122 -0.0123173363 0.0868161369 -0.0072092019 -0.0244445446 0.0193191717 -0.0158935687 0.0049674862 0.0124289975 0.0018908494 -0.0412562507 0.0234379237 -0.0281007288 0.0289880971 0.0517712196 0.0130749780 -0.0088947676 0.0036338937 -0.0050113989 0.0181195913 -0.0390413188 0.0128364671 -0.0940968442 0.0149298242 -0.0554915016 -0.0253173124 0.0807925893 -0.0197250311 0.0006017377 -0.0005237352 0.0004236723 -0.0060632939 0.0059754096 -0.0050567980 -0.0060503551 -0.0042170018 -0.0001807009 0.0029453399 0.0031667838 -0.0007569223 -0.0041308006 -0.0019851528 0.0026557051 0.0223572083 -0.0077982953 -0.0100750627 0.0045481008 0.0008918773 -0.0032525987 0.0124331262 0.0271753001 -0.0228123375 0.0065217092 0.0036167180 -0.0013835618 0.0108779026 -0.0034090425 -0.0046453340 -0.0044901840 -0.0004184699 0.0018753055 -0.0030864803 -0.0142604787 -0.0004125052 0.0017835252 0.0002147791 -0.0009787287 0.0001319491 -0.0016750490 0.0005692919 0.0027676953 0.0143472237 0.0009441903 -0.0039444726 0.0019660422 -0.0015299211 0.0052587527 -0.0052010213 0.0008157107 0.0121017399 -0.0002274316 0.0045741575 0.0005914510 0.0004495779 -0.0007756095 -0.0000972671 -0.0002401137 0.0001442925 -0.0011928998 0.0028404909 0.0023767365 0.0031319746 -0.0034381851 -0.0030510824 -0.0008473389 -0.0015053598 -0.0015019457 0.0059235648 -0.0085296657 -0.0112379259 -0.0082300589 -0.0068434051 0.0040241630 0.0031139515 0.0021792682 -0.0021037306 0.0029910396 0.0027974084 0.0001670293 -0.0007520084 -0.0000516760 0.0010871743 -0.0010796747 -0.0004447084 0.0012419514 -0.0016239101 -0.0021712319 -0.0004099300 0.0000256676 0.0002011534 0.0008165564 -0.0027951868 -0.0042307359 -0.0016559176 -0.0020188089 -0.0001751202 0.0031354273 -0.0003414442 0.0017348261 0.0020216603 -0.0001311007 -0.0008142976 -0.0015786378 -0.0026544741 0.0002572972 0.0084810823 0.0101337789 -0.0007835608 -0.0273457076 0.0017074784 0.0006845753 -0.0037776682 0.0024340164 0.0018915033 -0.0000769193 -0.0003967877 0.0001478961 0.0018727861 0.0001997069 -0.0016678300 -0.0017738992 -0.0004682725 0.0002495555 0.0021441876 -0.0026516047 -0.0025789517 -0.0026897820 -0.0026185421 0.0012739132 0.0047257322 -0.0015817780 0.0188414613 0.0091180667 0.0026657914 0.0024301552 -0.0075244061 0.0014993487 0.0026925837 0.0054086437 -0.0017479598 -0.0021048130 0.0009600868 0.0003030464 0.0001543895 -0.0009224658 -0.0130365526 -0.0151196487 0.0089230055 -0.0006173482 0.0042527468 0.0059070557 0.0032364942 -0.0018381407 -0.0062226227 -0.0050256524 0.0046710942 0.0096461045 -0.0008747903 -0.0013885876 -0.0019803185 0.0032530915 0.0070381113 -0.0026407205 0.0170462625 0.0205230811 0.0129043780 0.0083538061 0.0263432639 -0.0227505667 0.0135550774 0.0252272205 -0.0037730133 0.0021918557 0.0007840690 0.0002193394 -0.0017824607 0.0054769067 0.0093233665 -0.2312590694 -0.2754910431 -0.1280533503 -0.1579708500 0.0177401867 0.1787983426 0.1394053218 -0.0584374612 -0.2187979491 -0.1115350610 -0.3809158662 0.2500854315 0.2475773938 -0.1128347105 -0.0561738502 -0.2753544122 0.1062281983 0.1439737635 0.1858719254 -0.0074554275 -0.0616036846 -0.0725135269 -0.2847417763 0.1995138363 -0.2989334723 -0.0867938818 -0.0756857341 -0.0289244395 -0.0155019851 -0.0765653647 0.0518344217 -0.0692355355 -0.0309043870 -0.0087984996 0.0146103063 -0.0209052754 -0.0016764586 -0.0033949864 -0.0036873251 -0.0066526667 -0.0021790667 0.0016085338 0.0049839044 0.0026368549 0.0007564686 0.0006540031 -0.0015210076 -0.0035723980 -0.0048325780 -0.0019730990 0.0004112730 0.0027354089 0.0023597256 0.0017400592 0.0142087588 0.0108897403 0.0070675204 0.0000327655 0.0028333290 0.0064724705 0.0025610282 0.0010046612 -0.0009937367 0.0123493044 0.0083587049 0.0051970229 0.0004818764 0.0027923565 0.0044622826 -0.0071431502 0.0041834345 -0.0021746222 0.0055489211 -0.0044399433 -0.0003783820 0.0026755428 0.0004814095 0.0054972291 -0.0068023398 0.0043771911 -0.0012539311 0.0042552821 -0.0043674154 -0.0018112165 0.0106454393 -0.0145628519 -0.0102014495 0.0002275008 -0.0007079587 -0.0090878597 -0.0050586638 0.0027732280 -0.0048868700 0.0139958090 -0.0141292372 -0.0111502453 -0.0046935932 -0.0022038238 -0.0101766216 -0.0010682363 -0.0000887359 0.0025085051 -0.0010567363 -0.0004819284 -0.0010450804 0.0020158999 -0.0004218213 0.0046056124 0.0020792216 -0.0016856243 -0.0017467916 -0.0005250514 0.0034110498 0.0006385890 0.0038769561 0.0044982593 -0.0015401451 -0.0048915534 -0.0040745495 0.0023059742 0.0065764164 0.0037509046 -0.0033938892 0.0056707917 -0.0077254453 -0.0036426584 -0.0071326702 -0.0146455203 0.0026441193 -0.0099291634 0.0004750664 0.0060268632 0.0024060691 0.0007917453 -0.0013528874 0.0225225464 -0.0079248192 -0.0159000419 0.0081960411 -0.0209878875 -0.0069194918 0.0022337717 -0.0059666091 0.0014743264 -0.0022839717 -0.0028813925 -0.0011307562 -0.0097649933 0.0032606225 -0.0061105806 0.0015598347 -0.0021120865 0.0010774756 0.0252784780 0.0002533789 0.0169227759 0.0159170227 0.0194938517 0.0078441046 -0.0029185520 0.0057946044 -0.0019167362 0.0052939999 -0.0060015590 0.0033614307 0.0069525962 0.0059859701 0.0031743467 -0.0027985318 0.0184576590 -0.0027245406 -0.0019596853 -0.0042536860 -0.0009705092 -0.0134740066 0.0234746231 0.0195951354 0.0053071950 0.0026222293 0.0007505526 0.0292384358 0.0291508412 0.0001825285 0.0104467091 0.0098469923 0.0029575608 -0.0356539442 -0.0600354632 -0.0552261608 -0.0513227907 -0.0476331973 0.0663646935 -0.0342195295 -0.0067114216 -0.0505584906 0.0802910268 0.0182006181 -0.0304120945 0.0865630427 -0.0232041316 -0.0371679922 -0.0541447025 0.0013321374 0.0242415071 -0.0449599841 -0.1721368817 0.0002698462 0.0398983349 0.0056604892 -0.0205440227 0.0455138997 -0.0257760224 0.0258070164 0.0093390906 0.1838927724 -0.0004946090 -0.0573720351 0.0140358623 -0.0254334040 0.0760072179 -0.0378999918 0.0296904549 0.0941185942 -0.0099034416 0.0361415947 -0.0173114445 -0.0054375270 -0.0064085245 -0.0121336834 0.0089028070 0.0048622409 -0.0011192767 -0.0005515640 -0.0005100943 0.0009202120 -0.0008333975 -0.0004814735 0.0021289382 0.0021321141 0.0015762141 0.0033945118 -0.0032422675 -0.0029897332 -0.0034219326 -0.0026637370 0.0019662526 0.0014444197 0.0012396787 -0.0006864572 0.0008982315 0.0016453513 0.0009394848 -0.0004547295 -0.0003722945 0.0000939537 -0.0004930437 -0.0003793475 0.0002781577 -0.0005020815 -0.0008152082 -0.0002083104 -0.0002301899 -0.0003934404 0.0006983380 -0.0007991293 -0.0015255170 -0.0004134474 -0.0010083043 -0.0002125278 0.0014707238 -0.0009712624 0.0011125182 0.0000838328 0.0005500928 -0.0009101098 -0.0012366470 -0.0009940079 0.0008993288 0.0004666823 -0.0001216528 -0.0016659935 0.0020629521 -0.0020555206 -0.0012517160 0.0006335993 -0.0021475322 -0.0014116364 0.0006226691 0.0015140663 0.0008165972 -0.0005891507 0.0002264288 0.0001583094 -0.0012373587 0.0005226999 0.0007675241 0.0015210499 0.0002136780 -0.0001678531 -0.0012131944 0.0009806137 0.0011267272 0.0008757818 0.0015198318 -0.0030148393 -0.0024953805 0.0018015172 0.0004661692 -0.0001549925 0.0038521675 0.0040584087 0.0050958336 0.0084006079 0.0057961598 -0.0012276115 0.0003113280 0.0005567438 -0.0009193157 -0.0078927834 -0.0102014359 0.0066096387 -0.0163996149 0.0156795565 -0.0032274284 -0.0003441473 0.0008204776 0.0006296586 0.0007791639 -0.0006065858 -0.0013364682 0.0001517584 0.0001576559 0.0001479581 -0.0006804255 -0.0017593602 0.0008341996 -0.0015451540 -0.0039371961 -0.0026824210 -0.0022819412 -0.0076752942 0.0060921863 -0.0027341743 -0.0063916430 0.0014644789 -0.0005817598 -0.0001898557 -0.0001084844 0.0000167005 -0.0009255654 -0.0019268641 0.0427141291 0.0408240302 0.0266412588 0.0104908819 -0.0023617082 -0.0321907464 -0.0279814991 0.0235636969 0.0403154572 0.0298560614 0.1055332711 -0.0719530585 -0.0685766993 0.0361816116 0.0170740348 0.0762560620 -0.0296304514 -0.0351755349 -0.0509343187 0.0050047131 0.0069885424 0.0171688326 0.0757069536 -0.0460386163 0.0715263977 0.0148644114 0.0152920363 0.0104014202 0.0046413524 0.0151481364 -0.0120477480 0.0143337742 0.0070356734 0.0048115505 -0.0072874943 0.0045608704 -0.0201762344 -0.0103022442 0.0041963525 -0.0235221348 -0.0150256195 -0.0064350558 0.0026158883 0.0102652865 0.0163571061 0.0152743855 0.0031922905 -0.0060294825 -0.0030987337 -0.0094160086 -0.0152282459 -0.0191192393 0.0032202592 0.0199580609 0.0745645815 0.0460478824 0.0161625834 0.0626451961 0.0084389940 -0.0301910076 0.0069276064 0.0019025205 -0.0010983643 0.0649371968 0.0277415951 -0.0000000131 0.0696734857 -0.0014929793 -0.0521371264 -0.0212620135 0.0220217854 0.0093913130 0.0006988190 -0.0098668264 -0.0179529472 0.0161776888 -0.0087998831 0.0050727438 -0.0030372293 0.0107672370 0.0173281460 -0.0188025616 0.0028230069 -0.0199197090 0.0664034154 -0.0677297395 -0.0268092704 0.0569819480 -0.0287112554 0.0251416451 0.0040669674 -0.0024197789 0.0014910096 0.0615328745 -0.0478646403 -0.0074483212 0.0700044176 -0.0211047484 0.0480516871 -0.0030675394 -0.0000416693 0.0068640379 -0.0054489023 -0.0020556936 -0.0049335103 -0.0032084065 0.0005287415 -0.0059682312 -0.0032301665 0.0029190895 0.0038061887 -0.0007999168 0.0645986447 0.0079712800 0.0388080538 0.0256397058 -0.0178949748 -0.0687733078 -0.0489264673 0.0333803011 0.0776413122 0.0316659669 -0.0412434199 0.1315022235 -0.1106168540 -0.0811951427 -0.0567791129 -0.1539566175 0.0172335544 -0.1237121933 0.0132324331 0.0759280420 0.0339409164 0.0177619394 -0.0184931403 0.3241554350 -0.1009337764 -0.2263139048 0.1093116634 -0.2600906483 -0.0904037079 0.0241113656 -0.0336914248 0.0144302465 -0.0185583440 -0.0628354598 -0.0080585334 -0.1266813956 0.0249014956 -0.0780954393 0.0316388680 -0.0251881951 0.0203965271 0.3673923800 -0.0204858155 0.2470995879 0.1867375009 0.2031174062 0.0943941369 -0.0559897740 0.0718672983 -0.0347387592 0.0665355193 -0.0585944397 0.0411197055 0.1762528713 0.0623404717 0.0895667313 -0.0024232766 0.1623373384 -0.0111640925 0.0007657695 0.0004628535 0.0006745443 -0.0016976187 0.0001791426 -0.0060415986 -0.0042050968 -0.0039881210 -0.0013433868 -0.0036061438 -0.0020071887 -0.0020278029 -0.0036179825 -0.0013672463 -0.0006327508 0.0022791714 0.0048564029 0.0045231045 0.0219910359 -0.0055212751 -0.0115926882 0.0185037746 0.0107464837 0.0171801428 0.0009840269 -0.0027609156 -0.0013326177 -0.0045892616 0.0024285826 0.0018689101 0.0004333314 0.0011214838 0.0000359161 0.0007124401 -0.0035813875 -0.0008759239 0.0006109487 0.0013108911 -0.0004443128 -0.0006666506 -0.0005973785 -0.0004512472 0.0005573467 0.0026408479 0.0004168885 0.0001411731 0.0008440619 0.0002838134 0.0006203119 -0.0014143199 -0.0000388871 0.0017249045 0.0006980080 0.0003877792 -0.0002885898 0.0006820410 0.0011733080 -0.0010327436 0.0012345669 0.0002567534 0.0006596460 -0.0092311447 -0.0069416694 -0.0054043647 0.0086091133 0.0059444316 0.0062947359 0.0061895800 0.0079049293 -0.2200335062 0.1968361908 0.3025851481 0.1099297754 0.0967818691 -0.0462936679 -0.0410616291 -0.0248263629 0.0338647810 -0.0406137807 -0.0421469206 -0.0103021843 0.0040001396 -0.0080485263 -0.0156520155 0.0220657812 0.0117162190 -0.0221885276 0.0129443769 0.0140084181 -0.0018236378 0.0061807617 0.0033004095 -0.0203094519 0.0430911906 0.0827337804 0.0420576532 0.0184481495 0.0204537505 -0.0010157268 0.0255963978 0.0290008216 0.0075773898 -0.0520679943 0.0284297298 0.0463522464 0.0962091472 -0.0375307595 -0.1159252967 -0.0538825714 0.0470521589 0.2029589348 0.0425434463 0.0362218400 0.0240387638 0.0299984281 0.0163596602 -0.0188098108 -0.0398068794 -0.0292415150 -0.0109305612 -0.0060955353 0.0118872573 0.0642324278 -0.0103298441 -0.0255109928 -0.0728213560 0.0284024420 0.0388176615 0.0766653396 -0.0218664903 -0.0346670214 -0.0669537982 -0.0961747345 -0.1015843360 -0.1006827122 -0.0890543640 -0.0406484314 0.0969386510 -0.1394588663 -0.1535391669 -0.2206264606 -0.2257319783 -0.1495160551 0.0232108815 -0.0065675661 -0.0074855847 0.0136323490 0.2129386257 0.2265439135 -0.1249862300 -0.0012680698 0.0012221123 0.0001938243 -0.0150733378 0.0057475989 0.0336731339 0.0023882095 -0.0241091681 -0.0327908688 0.0019935621 0.0065390715 0.0082892087 0.0020641600 0.0030436534 0.0002194315 0.0043500572 0.0021622652 0.0010713121 0.0001259112 -0.0020976655 0.0014622590 0.0023947298 0.0011036391 0.0008357828 0.0060462612 0.0027274711 0.0001039223 -0.0054813149 -0.0086610747 -0.0008993143 -0.0353801256 -0.0648278967 -0.0114989370 -0.0525869350 0.0024113385 0.0399611735 0.0188678617 0.0105899079 -0.0368099344 -0.0003368846 0.0095126065 -0.0142972961 -0.0086140736 0.0063034719 0.0034435480 -0.0029337516 -0.0011808569 -0.0069649111 0.0130628592 0.0055372852 -0.0317478924 -0.0109962341 -0.0170617626 0.0312415074 -0.0395399630 -0.0250907446 -0.0156284035 0.0269026943 0.0138299751 0.0784644760 0.0125625278 0.1004915186 0.0012334833 -0.0122799080 0.0018942366 -0.0384794975 -0.0009761004 0.0015209672 0.0025850633 0.0039797574 0.0010667324 -0.0008521471 -0.0030516500 -0.0016423117 0.0000619669 0.0014820783 0.0013032071 0.0018119662 0.0045000955 0.0012143580 -0.0015746997 -0.0044780918 -0.0017531201 0.0006876046 -0.0101612583 -0.0073963222 -0.0044174842 0.0013017262 0.0028365234 -0.0083500879 -0.0051072794 -0.0011390073 0.0040082235 -0.0047326040 -0.0044303634 -0.0042940191 0.0044864881 -0.0028437621 -0.0070752476 -0.0005417972 0.0001210453 -0.0006031123 0.0002961020 -0.0004106662 0.0001192791 0.0055317685 -0.0028163340 0.0019415219 -0.0013190154 0.0007216077 -0.0006913884 0.0016511958 -0.0008963649 0.0007337709 -0.0017417957 0.0017855263 -0.0002980359 0.0012198831 0.0009239093 -0.0005243833 -0.0259208034 0.0151094188 -0.0038873464 0.0029801986 -0.0040192772 -0.0028500220 -0.0062223239 0.0006991194 -0.0051293550 0.0019420762 0.0000602553 -0.0049229897 0.0016603430 0.0005778590 0.0014986170 0.0087265763 -0.0014503226 0.0161599924 0.0106467578 -0.0100008661 -0.0133649447 -0.0001603406 0.0005678315 0.0000999888 0.0001697433 0.0008847564 0.0000636867 -0.0041118092 -0.0004697817 0.0022766753 0.0026314608 0.0001423991 -0.0014778379 0.0091330446 -0.0040483844 -0.0055591923 0.0023491892 -0.0008606312 -0.0015975816 -0.0044303742 0.0014955925 0.0028852564 0.0020136022 -0.0001798726 -0.0011968100 0.0125620165 -0.0026537819 -0.0090906528 0.0037279397 -0.0057499013 -0.0029218084 0.0002335002 -0.0008570713 0.0001544969 -0.0001024463 -0.0005816520 -0.0001177175 -0.0016171203 0.0003466449 -0.0009459286 0.0005059955 -0.0003473529 0.0003243073 0.0032725873 -0.0001296200 0.0018903206 0.0021094020 0.0018638603 0.0010378700 -0.0009590771 0.0007026019 -0.0005447032 0.0006684067 -0.0001927654 0.0003935491 0.0032864988 0.0004152556 0.0015819987 0.0006485355 0.0004180945 0.0002734693 -0.0062716855 0.0153073754 -0.0286107216 0.1503346219 -0.1933907381 -0.0007825728 0.0172544563 0.1772571022 0.1370420238 -0.0886582458 -0.2384093534 0.1695031992 0.0281329368 0.0001227301 -0.0039460936 0.0193526523 0.0446659047 0.0376356116 -0.1766661352 0.1203106767 0.0391179508 -0.1371035793 -0.1081203326 -0.0994809312 0.0002311259 0.0006647542 0.0000114963 0.0008200225 -0.0004869063 -0.0004697317 -0.0001735392 -0.0002483723 0.0000301829 -0.0004512352 -0.0002171537 0.0003058423 0.0004678732 -0.0001556726 -0.0003453202 0.0004211745 0.0005152945 0.0002287517 -0.0007233654 0.0002078122 -0.0004242158 -0.0006070578 0.0004681191 -0.0002594254 0.0001193078 -0.0012526533 -0.0003348243 0.0026481119 0.0001150939 0.0009768398 -0.0000237517 0.0001084307 0.0002615868 0.0000216976 0.0000886824 0.0002983158 -0.0004700146 -0.0024238244 -0.0022333195 -0.0011320283 0.0022143182 0.0017989275 0.0020443623 0.0012917344 0.0023544845 -0.0786653525 0.0751789308 0.0973059766 0.0365717856 0.0300880993 -0.0185860395 -0.0147219814 -0.0109271615 0.0093046042 -0.0119180291 -0.0147471781 -0.0072029639 0.0037286193 0.0006564327 -0.0041706206 0.0056802167 0.0039178699 -0.0051512954 0.0042917205 0.0061565588 0.0007281573 0.0027543287 0.0033481260 -0.0039686212 0.0115186840 0.0205570507 0.0068037900 0.0095232685 0.0031222678 -0.0099070003 0.0069572667 -0.0036017761 -0.0021455642 -0.0175945327 0.0101683255 0.0163970923 0.0319927415 -0.0130335595 -0.0353061047 -0.0155664276 0.0143963536 0.0652442074 0.0222774159 0.0175691973 0.0072242939 0.0137113097 0.0083314995 -0.0053543852 -0.0147716949 -0.0123791225 -0.0104195839 -0.0052792352 0.0020976397 0.0252144585 -0.0021748374 -0.0096611680 -0.0330759890 0.0081060742 0.0135142225 0.0321493671 -0.0222267119 -0.0155866870 -0.0016007422 -0.0470126626 -0.0370342651 -0.0410329484 -0.0410697659 -0.0171399149 0.0536382899 -0.0548823467 -0.0581360875 -0.0774566132 -0.0976804457 -0.0638389939 0.0136822232 -0.0033470358 -0.0039303037 0.0043162015 0.0615641495 0.0736971157 -0.0429390024 0.0004983749 0.0008486591 0.0017798276 0.0011925230 -0.0067528654 0.0105776653 0.0024194449 0.0018997927 -0.0011299231 -0.0001755856 -0.0014519395 -0.0015762413 -0.0008882772 0.0003576547 0.0008283744 -0.0036985487 -0.0010262515 0.0008158033 -0.0012158398 0.0007564082 0.0010491769 0.0000364965 -0.0000899720 -0.0003816429 -0.0028486759 -0.0003225755 0.0032758134 -0.0071818140 0.0026862842 0.0112664286 0.0064747151 0.0403446169 -0.0085944377 0.0485489036 -0.0027609618 -0.0129039048 0.0000499473 -0.0250500878 0.0074950310 0.0133742109 0.0130907406 0.0098993597 -0.0043057054 -0.0216033764 -0.0063681271 0.0110607992 -0.0027157203 -0.0250802031 -0.0014584865 -0.0006145007 0.0032840567 0.0009358423 0.0012453580 -0.0023831790 0.0035809335 0.0020588454 0.0010251984 0.0223385450 0.0013330184 -0.0575600076 0.0757077003 -0.0162940979 -0.0390477003 0.0139553069 -0.0238678858 -0.0775529382 -0.0006990827 -0.0001856013 0.0003018874 0.0002860978 0.0002094094 0.0002258463 -0.0000701875 -0.0000804844 -0.0001760421 0.0017279160 0.0003732273 -0.0004147153 0.0003036167 0.0001423823 0.0001198216 0.0000923204 -0.0001772096 -0.0004235332 -0.0018027702 -0.0012716858 -0.0000955380 -0.0005625637 0.0003865570 -0.0001012121 -0.0082305743 -0.0020508360 0.0015101158 -0.0003885675 0.0002039410 -0.0001055842 -0.0016715419 -0.0003575896 0.0012007147 -0.0019383153 0.0011103578 -0.0005861893 0.0018719335 -0.0012880963 0.0000685950 -0.0020166014 0.0018034737 0.0009721770 -0.0015137796 0.0008256241 -0.0003797848 0.0011322156 -0.0011929070 -0.0005878148 0.0035974579 -0.0042165386 -0.0031982004 -0.0024690233 -0.0003191284 -0.0036956393 0.0097859072 -0.0057326929 0.0015445602 0.0026857037 -0.0021457758 -0.0024267244 -0.0007950424 -0.0011459619 -0.0020709897 0.0021151344 0.0000425708 -0.0047059103 0.0039630688 0.0015031835 0.0035998673 -0.0034844601 0.0005564848 -0.0062649965 -0.0039156143 0.0036523641 0.0048823323 0.0002440186 0.0001717961 -0.0000985404 -0.0001676061 -0.0001895304 0.0000604443 0.0002016840 0.0000643999 -0.0001034716 -0.0002853549 -0.0001202001 0.0001518217 -0.0000855785 0.0001740965 0.0000176678 0.0001605036 0.0005205751 -0.0000895194 0.0002852036 -0.0000091587 -0.0001640598 -0.0000190007 -0.0000766875 0.0000055280 -0.0006829473 0.0002552739 0.0003466625 -0.0002734653 0.0008173131 0.0001947319 0.0003802644 -0.0000162928 0.0002117373 -0.0001783478 -0.0002659581 -0.0000771982 0.0008242053 0.0002643493 0.0004726262 -0.0005985351 0.0000061399 -0.0003460844 -0.0019512346 0.0006066380 -0.0012877155 -0.0004908260 0.0003507484 -0.0003841145 0.0011092106 -0.0000499731 0.0006141330 -0.0003301911 -0.0003295346 -0.0001633968 -0.0030649572 0.0003482278 -0.0016936636 -0.0012509545 0.0019555551 -0.0008839420 0.0108489605 -0.0421305929 0.0188229192 -0.3262866778 0.4534987240 0.0588911088 -0.1326650761 -0.2796454159 -0.1718285004 0.2758709698 0.4366781963 -0.2039144494 -0.0075755473 0.0164247218 -0.0115910845 -0.1214141233 -0.0749328578 -0.0662698977 0.1332630050 -0.2197308312 0.0476869577 0.1236292957 0.0492244837 0.1576582980 -0.0064942644 -0.0011152168 0.0022380788 -0.0098932620 0.0005362182 0.0042835014 0.0057521685 -0.0022507087 -0.0031592378 0.0047090191 0.0039933061 -0.0023760580 -0.0029193911 0.0047894942 0.0022528288 -0.0087812348 0.0003252453 -0.0038017503 0.0054159056 -0.0086024904 0.0031984340 0.0007772497 -0.0073124388 -0.0008617212 0.0015489598 0.0136714019 0.0014227212 -0.0210755684 -0.0055934317 -0.0101946816 0.0002063801 -0.0010148760 0.0017048041 0.0014009946 -0.0026663061 -0.0000891796 0.0017634285 0.0020111134 -0.0007247851 -0.0013745618 -0.0006896393 0.0009128915 -0.0019229076 -0.0026657810 -0.0005036144 -0.0241663771 0.0193890191 0.0329290830 0.0242270956 0.0197875414 -0.0123423644 -0.0088072908 -0.0065832030 0.0054097122 -0.0060411101 -0.0104087163 -0.0053394417 0.0015269190 -0.0004588130 -0.0030899714 0.0037916349 0.0037151941 -0.0010372427 0.0022381644 0.0026005163 -0.0010050875 0.0022123305 0.0029296022 -0.0025470180 0.0090379036 0.0146152930 0.0068028719 0.0065205616 0.0033198319 -0.0068947906 0.0065319345 0.0033932305 0.0011951189 -0.0067296898 0.0058784004 0.0085425648 0.0099128483 -0.0058618941 -0.0104244328 0.0010179189 0.0008006864 0.0064463785 0.0084599720 0.0062477966 0.0016686148 0.0058751041 0.0036624731 -0.0020574170 -0.0054345621 -0.0041370364 -0.0034109840 -0.0010414967 0.0015920833 0.0090274467 -0.0015193840 -0.0036003942 -0.0106161666 0.0021002394 0.0040550296 0.0104245709 -0.0061204850 -0.0092025150 0.0015190173 -0.0159186246 -0.0148821061 -0.0152148407 -0.0125078628 -0.0077973381 0.0155905640 -0.0184877067 -0.0206241767 -0.0257344796 -0.0340403090 -0.0224657046 0.0048059352 -0.0027182469 -0.0031514081 0.0036349681 0.0497227424 0.0543961957 -0.0329317357 0.0139557787 -0.0066750483 0.0090986897 0.0070274929 0.0079526076 -0.0078238003 -0.0007875976 0.0049071888 0.0069630935 -0.0008038357 -0.0001327001 -0.0027598157 0.0034833133 -0.0033851552 0.0026097433 0.0395628704 0.0055898101 -0.0028106390 -0.0063790369 -0.0111555215 -0.0024078936 0.0000506038 -0.0019877581 0.0012820572 -0.0053173980 -0.0006948220 0.0004200249 -0.0080843284 0.0023701771 -0.0002623223 -0.0962090826 -0.3393022786 0.0169050997 -0.4748085718 0.0273212242 0.0993452570 0.0114779861 0.2470904584 -0.0998920075 0.0206567838 0.0973068440 -0.0783518037 -0.0439595917 0.1083424086 0.0350872981 0.0922973720 -0.0371058626 0.0614809192 -0.0349681683 0.0128218086 -0.0260282158 0.0008045177 0.0458078213 -0.0022942353 0.0218630845 -0.0217468731 -0.0097614065 0.0971628532 0.0318616513 0.0027426925 -0.0149567080 0.0202446409 0.0078178368 0.0597432703 -0.0876383458 -0.0122949267 -0.0033871255 0.0011234968 0.0040329433 0.0066813863 0.0035915563 0.0012627819 -0.0035390434 -0.0019144314 -0.0022594857 0.0159431976 0.0048084647 -0.0024847131 0.0029053150 0.0022108344 0.0024845515 0.0024853645 -0.0023450967 -0.0061426956 -0.0252876033 -0.0152434697 -0.0066223311 -0.0040174612 -0.0058926959 -0.0000708855 -0.0856448061 -0.0220698539 0.0145172009 -0.0124771590 -0.0034859738 -0.0020195530 -0.0202923388 -0.0019069022 0.0123255495 -0.0101982001 0.0076099514 0.0016461337 0.0160569805 -0.0059305071 0.0060568079 -0.0804181625 0.0473585305 -0.0162640523 0.0032038808 -0.0027467805 0.0017186711 -0.0068142020 -0.0002202270 -0.0114756805 0.0380575267 -0.0387447485 -0.0197432934 -0.0310852822 -0.0069212151 -0.0236187974 0.3637813858 -0.2076817930 0.0490590545 -0.0036011348 0.0149362509 0.0054225070 0.0418285402 -0.0192363454 0.0310189565 0.0219651966 0.0005768703 -0.0484659634 0.0418647289 0.0157570423 0.0376739435 -0.1215997615 0.0197633216 -0.2165938933 -0.1475886994 0.1345671089 0.1807099531 0.0028573216 -0.0049537636 -0.0019649949 -0.0049306310 0.0013154263 0.0029540248 -0.0020569740 0.0048471090 0.0016183457 -0.0045963750 -0.0049416853 0.0021538741 0.0114701214 0.0025620072 -0.0059023020 0.0151486999 0.0200893506 -0.0066921326 0.0020080251 0.0025636892 -0.0011267791 0.0026702770 -0.0031810881 -0.0018603245 -0.0089781696 0.0062203065 0.0076585115 -0.0023170714 0.0185241826 0.0030272429 0.0041430826 -0.0034945863 0.0023311997 -0.0071004506 0.0041583338 -0.0030906067 -0.0030250438 0.0031960300 -0.0022046925 -0.0030174483 -0.0028089606 -0.0015138245 0.0129382145 0.0025885706 0.0092320401 0.0116239742 0.0203830807 0.0049744424 0.0003713335 0.0031619043 -0.0000345910 0.0050391592 -0.0063345232 0.0032384867 -0.0087706531 0.0048164058 -0.0049252066 -0.0047749877 0.0212711079 -0.0041322134 -0.0003870371 0.0095768845 -0.0081624789 0.0660239412 -0.1103921510 -0.0546885122 -0.0157599673 0.0903132251 0.0879290070 -0.0547238809 -0.1414861610 0.1039145858 -0.0132868264 0.0019167734 0.0111570540 0.0276163542 -0.0987948216 -0.0972696153 0.0419556679 -0.0905152869 0.0322860439 0.0711919512 0.1226864201 -0.0681523603 0.0044634228 0.0083289588 -0.0002068066 0.0169594281 -0.0066069017 -0.0083377115 -0.0050293579 -0.0017575249 0.0018603812 -0.0074192677 -0.0016347204 0.0042794876 0.0070977440 -0.0056354028 -0.0040164007 0.0077621609 0.0042094530 0.0039477341 -0.0069289329 0.0032218350 -0.0044115778 -0.0055419298 0.0024482401 -0.0024144964 0.0034550782 -0.0084462157 0.0004826923 0.0179088279 -0.0004896166 0.0078954542 -0.0016825741 -0.0012002593 -0.0010011501 -0.0011524617 0.0013865266 0.0012160084 -0.0017780892 0.0001433183 -0.0004187910 0.0011361734 -0.0007397244 -0.0003950973 0.0014626014 0.0010630212 0.0011203166 0.0338521563 -0.0277782087 -0.0451626220 -0.0046162420 -0.0041976551 0.0023560846 0.0029949419 0.0022091070 -0.0020858901 -0.0000475995 0.0019182552 0.0043467827 -0.0015210083 -0.0015253202 -0.0001710915 -0.0013015714 -0.0000792948 0.0025342697 -0.0002949147 -0.0008869170 -0.0015691432 0.0019132879 0.0006363940 0.0006253977 0.0001190654 -0.0003134986 0.0018512444 -0.0003550622 -0.0006609691 -0.0018689286 0.0045456416 0.0059511910 0.0039423666 0.0045028294 -0.0024377945 -0.0026117874 -0.0104330767 0.0051159489 0.0032584048 0.0085291551 -0.0314816950 0.0050926145 -0.0021962470 -0.0019996105 0.0015993321 -0.0025135297 -0.0012743250 0.0022339358 0.0025037123 0.0025834970 0.0001301169 -0.0000708052 -0.0015509364 -0.0046860989 0.0013113866 0.0019260204 0.0035307594 -0.0018872011 -0.0025171848 -0.0055969868 0.0059042958 -0.0034137755 0.0059344786 0.0020047153 0.0078614465 0.0038302877 0.0042269047 0.0026208272 -0.0020153288 0.0111495807 0.0097951150 0.0158204212 0.0146387019 0.0097191104 -0.0004483948 0.0005845971 0.0011521788 -0.0016690013 -0.0269566956 -0.0244702505 0.0152873684 -0.0007603574 0.0029024854 0.0020175975 0.0117681192 0.0149538319 -0.0005777932 0.0152157814 -0.0079060996 -0.0208791794 0.0016515188 0.0059561714 0.0055367570 -0.0006618977 0.0006322290 0.0006691006 -0.0057410090 -0.0004948068 0.0015112645 -0.0003208118 0.0020506903 0.0002663544 0.0016998834 -0.0007065227 0.0011831409 -0.0122074145 -0.0060593487 0.0121938640 -0.0014502119 -0.0195847245 0.0240416945 0.0031189843 0.0485956892 -0.0139350783 0.0714572184 -0.0039086301 -0.0088743523 0.0057586988 -0.0435167947 0.0028847980 0.0057845315 -0.0099572489 0.0235165727 0.0084103670 -0.0310227920 -0.0100375853 -0.0089277041 0.0042843033 -0.0223633776 -0.0113451679 0.0073667251 -0.0209567696 -0.0022449324 0.0136870937 0.0092202659 -0.0071501807 -0.0160921588 -0.0081248688 -0.1230423622 -0.0423735669 0.0469157067 0.2771240244 0.1761624258 -0.1182972625 -0.1151797626 0.1436007112 -0.3372938742 -0.0042607886 -0.0029756682 0.0001652024 -0.0016208417 -0.0001617735 0.0013987785 -0.0004937637 0.0015131353 0.0014011598 0.0189999463 0.0037845835 -0.0069702558 -0.0014146159 -0.0003539570 0.0012660683 0.0018873495 0.0001833632 -0.0017916935 -0.0041210227 -0.0004578194 0.0005769900 0.0059620939 -0.0026390401 -0.0006027245 -0.0826249932 -0.0209523908 0.0136495305 0.0042180183 0.0062694758 0.0021127452 -0.0116276221 -0.0007605236 0.0110790179 -0.0034206127 0.0025448543 -0.0001220744 0.0005372227 -0.0018367128 -0.0023330921 0.0063155528 -0.0025627289 0.0037565265 -0.0028126115 0.0023036849 0.0004156704 0.0007256429 -0.0015401451 -0.0013765364 0.0071361983 -0.0078413583 -0.0047343899 0.0051687781 -0.0022658489 -0.0001563276 -0.0198708221 0.0111797558 -0.0025940724 0.0082468039 -0.0083367239 -0.0045479061 0.0004040142 -0.0007313681 -0.0029662506 0.0206791971 0.0004913044 -0.0453626985 0.0402442647 0.0150396218 0.0360081435 0.0062560486 -0.0010216331 0.0111514937 0.0080469265 -0.0072498672 -0.0097213796 0.0019544940 0.0026367603 -0.0005383353 -0.0001497968 -0.0025770975 -0.0003599775 0.0046337900 -0.0007996188 -0.0026659878 -0.0025028985 0.0008093225 0.0015084878 -0.0093737564 0.0027639642 0.0052476601 -0.0049685118 -0.0015044496 0.0026705889 0.0043329354 -0.0012838334 -0.0027341520 -0.0019432071 -0.0003636443 0.0011199189 -0.0100754784 0.0022582858 0.0068598131 -0.0040292843 0.0061786737 0.0029411794 0.0029311171 0.0023105412 0.0016786852 -0.0012715253 -0.0037079196 -0.0006903884 0.0043222122 0.0010660543 0.0024744238 -0.0034778601 -0.0002081550 -0.0020012465 -0.0072683551 0.0025668528 -0.0048060501 -0.0023639929 0.0026448372 -0.0016339481 0.0060126094 0.0005026218 0.0032754286 -0.0014463238 -0.0019901669 -0.0006805879 -0.0138607744 0.0026001956 -0.0074393038 -0.0069883257 0.0119538854 -0.0047018369 0.0308301431 0.0075829323 -0.0215791260 -0.1240218895 0.0590836970 -0.3064121177 -0.4275584172 0.0662631544 0.2795826320 0.0659994801 -0.2479059951 0.3561995038 -0.0249813044 0.0023331599 0.0031604409 -0.0165271077 -0.0838022031 -0.0770477175 0.1350079343 -0.1574881266 0.0065697558 0.1404305775 0.1313121531 0.0581335262 -0.0000525558 -0.0080301036 -0.0009155061 -0.0062463146 0.0073472543 0.0038083680 -0.0001981968 0.0052676006 0.0014314713 0.0033669555 0.0094757269 -0.0002285506 -0.0052782092 -0.0016636260 0.0018342736 -0.0008042897 -0.0000661081 -0.0005113300 -0.0003007220 -0.0072950122 -0.0000004129 0.0023394570 -0.0004759272 0.0009982939 -0.0037597143 0.0018483902 -0.0016930968 -0.0030060097 0.0004172710 -0.0013279702 0.0003920681 0.0005856349 0.0001153419 0.0000018170 0.0012949414 -0.0006394670 0.0011716121 -0.0026175507 -0.0009640780 -0.0020154349 0.0029297629 0.0020216972 -0.0003582058 0.0009591481 0.0002824305 0.0046598229 -0.0151173329 -0.0030238008 0.0088603590 0.0068493341 -0.0037989802 -0.0047320045 -0.0031564426 0.0030158698 -0.0013331156 0.0008003911 0.0025960484 0.0012055086 0.0007264886 -0.0013452904 0.0013241709 -0.0000026304 -0.0025837047 0.0017156833 0.0018481326 0.0011753270 0.0015865685 0.0009212123 -0.0011657277 0.0045181211 0.0047476644 0.0022218104 0.0029040361 -0.0007544301 -0.0036417742 -0.0092597714 -0.0031544169 -0.0081086249 0.0002952004 -0.0006715854 -0.0006134235 -0.0013144694 0.0026659098 -0.0046155357 0.0086362489 -0.0260688543 0.0161716191 0.0040225911 0.0022948765 0.0003429275 0.0005817264 0.0005424896 0.0002017315 -0.0012240430 -0.0017484836 -0.0004997240 -0.0012396939 -0.0002152861 0.0015074427 -0.0002800620 -0.0005719154 -0.0029933410 0.0001733996 0.0009189592 0.0027465567 -0.0070259092 0.0071777142 -0.0009536595 -0.0063722637 -0.0060145111 -0.0057861363 -0.0021850605 -0.0029282882 0.0046627661 -0.0025002587 -0.0010822262 -0.0017341675 -0.0073760332 -0.0050063756 0.0018833262 -0.0015742658 -0.0011592361 0.0016411228 0.0150882864 0.0142162804 -0.0128133657 0.0015357344 -0.0001748433 0.0017729994 0.0162423854 0.0151713933 -0.0003060784 0.0077988322 -0.0132136275 -0.0239045752 0.0037216531 0.0092391926 0.0082537585 -0.0004398350 0.0009379886 0.0007330518 -0.0014937915 -0.0005515483 0.0007745760 -0.0015180958 -0.0001467098 -0.0004246931 0.0001546189 0.0028845116 -0.0018082363 -0.0152458328 -0.0013746963 0.0059214428 -0.0206478225 -0.0006471685 -0.0041478074 -0.0038384907 0.0149580133 -0.0102386522 0.0203868189 -0.0016113883 0.0016639354 0.0045698395 -0.0149351025 -0.0045137338 0.0099134759 0.0029990634 0.0152256237 0.0059498637 -0.0139223891 -0.0045579929 0.0017082231 -0.0007937813 -0.0120373265 0.0315071778 -0.0073864318 0.0073294162 -0.0066016925 -0.0429648916 0.0147066405 -0.0261169357 0.0012789873 -0.0028157685 0.2430606542 0.0830975869 0.0588099488 -0.0285134831 0.1110611333 0.0175694286 0.1322058171 -0.2018361270 -0.0536301881 0.0119645858 0.0006793602 -0.0096570813 -0.0076549923 -0.0042030278 -0.0022874467 0.0074853793 0.0008641068 0.0010076774 -0.0572794208 -0.0156647558 0.0125314481 -0.0040695012 -0.0024958614 -0.0038200769 -0.0036876495 0.0044864960 0.0116951360 0.0451762513 0.0255336233 0.0112252896 -0.0079639241 0.0151666964 0.0050195591 0.2693596078 0.0691464817 -0.0440914098 0.0135871463 -0.0033549358 0.0034603292 0.0450656395 0.0059747009 -0.0304420816 -0.0004448003 -0.0003613172 -0.0009932807 0.0024783751 -0.0006818473 0.0017498845 -0.0094410405 0.0059621243 -0.0010264661 -0.0003956158 -0.0005552314 -0.0013819739 0.0017640008 -0.0010484990 0.0004121210 0.0010702561 -0.0014733528 -0.0019866849 -0.0074926079 0.0013288112 -0.0059631671 0.0367113948 -0.0210316155 0.0051569529 -0.0028088524 0.0031024188 -0.0007082070 -0.0020337196 -0.0008502663 -0.0020078683 -0.0683117443 -0.0017654806 0.1491612410 -0.1311143793 -0.0491308754 -0.1173314878 -0.0123284387 0.0020241600 -0.0217720748 -0.0147129813 0.0134036498 0.0179195165 -0.0076346067 0.0001488898 0.0036065178 0.0052289124 -0.0009284972 -0.0030908190 0.0051538315 -0.0037314796 -0.0032028262 0.0037038681 0.0045081846 -0.0016834302 -0.0212549797 0.0021152553 0.0116527052 -0.0165415300 -0.0203959887 0.0075563032 0.0017888553 -0.0040745074 -0.0013737165 -0.0049471592 0.0045502991 0.0033284454 -0.0029344432 -0.0039752219 0.0010177152 -0.0001252319 -0.0180347356 -0.0013320976 -0.0022182298 0.0010058913 -0.0012438629 0.0014059167 0.0030415035 0.0007293998 0.0047710904 -0.0015446146 0.0030550590 -0.0002558946 0.0015442059 -0.0002735700 -0.0160008730 0.0001537733 -0.0111806409 -0.0082900916 -0.0104781937 -0.0040350604 0.0021026992 -0.0032343266 0.0013348687 -0.0031048287 0.0029804804 -0.0019414959 -0.0061554234 -0.0031692498 -0.0031064643 0.0007076735 -0.0091167546 0.0009201180 0.0308318077 0.0041267831 -0.0212201147 -0.1515260849 0.0935276246 -0.3068842531 -0.4443694331 0.0505463665 0.2747104760 0.0934374779 -0.2183900019 0.3539810810 -0.0277987171 0.0007693899 0.0051751959 -0.0025256900 -0.0908568394 -0.0846409715 0.1367161336 -0.1564894042 0.0044862692 0.1459918533 0.1464302478 0.0429952903 0.0027815247 0.0052488650 -0.0001671273 0.0102826250 -0.0041753041 -0.0050763687 -0.0029767571 -0.0012297301 0.0010382256 -0.0045219786 -0.0015348402 0.0025603591 0.0045541424 -0.0033001299 -0.0025137773 0.0051141634 0.0027371562 0.0025938086 -0.0045032496 0.0024144694 -0.0028227038 -0.0036747916 0.0015801960 -0.0015935587 0.0024248159 -0.0054861704 0.0004533161 0.0116269259 -0.0003519767 0.0051589659 -0.0012114836 -0.0008436489 -0.0006532697 -0.0007876003 0.0008462190 0.0007286996 -0.0010519375 0.0001741970 -0.0001663662 0.0007544601 -0.0006132742 -0.0003948084 0.0009476729 0.0005953303 0.0006685418 0.0084491941 -0.0040604564 -0.0099387941 -0.0016628423 -0.0014656630 0.0007424741 0.0010171176 0.0006989355 -0.0007523307 -0.0006956024 0.0002395130 0.0015308587 -0.0003675595 -0.0003608043 0.0000187016 -0.0004333639 -0.0001182897 0.0007178658 0.0000415953 0.0000219893 -0.0004683157 0.0003933971 -0.0000295573 0.0003176732 -0.0003485951 -0.0005458237 0.0000908208 -0.0003190165 -0.0001791344 -0.0004671914 0.0027675006 0.0020001588 0.0019702851 0.0018901796 -0.0009570628 -0.0008463814 -0.0025422824 0.0017110312 -0.0009809746 -0.0025959558 -0.0078585590 0.0128757275 -0.0026878796 -0.0019307881 0.0009994610 -0.0022885913 -0.0011853743 0.0013041462 0.0010503830 0.0010417577 0.0019688979 0.0009273055 -0.0000810257 -0.0024532792 0.0008219786 0.0011425612 0.0023316632 -0.0003595763 -0.0010636782 -0.0038654659 0.0034794859 0.0000534154 -0.0016617607 0.0029997516 0.0043295316 0.0022508115 0.0036281766 0.0021087005 -0.0041412986 0.0050517136 0.0047478852 0.0054978466 0.0114012454 0.0070592398 -0.0008532585 0.0004641750 0.0005783372 -0.0008246639 -0.0107972903 -0.0088721146 0.0065385252 -0.0006948747 0.0017508322 0.0008331199 0.0091099490 0.0043821774 0.0001473853 -0.0083022878 -0.0129160363 -0.0118480823 0.0049699663 0.0088289108 0.0070908302 -0.0010690645 0.0011713814 -0.0002774803 -0.0036703431 -0.0003414871 0.0004821149 0.0009451041 0.0011718884 -0.0007002380 -0.0004915300 0.0075074312 -0.0041784028 -0.0083314295 0.0034633121 -0.0066795904 -0.0319240057 0.0153316389 -0.0355123474 0.0016947385 0.0305373589 -0.0093075464 0.0494448649 -0.0031424897 -0.0016000063 0.0039132851 -0.0323239774 0.0036029145 -0.0036436535 -0.0218445571 0.0179807784 0.0135638474 -0.0144987700 -0.0052123476 -0.0207877094 0.0073918839 -0.0021794050 0.0774745600 -0.0210931419 0.0329691091 -0.0116276623 -0.1074869153 0.0242414046 -0.0544314190 0.0149084798 0.0000064383 0.5376090858 0.1899951661 0.1127788469 -0.3527274183 0.0621586244 0.1666463975 0.3352431543 -0.4802646796 0.2550701430 -0.0032331332 -0.0017734474 0.0007108067 -0.0004610344 0.0001658469 0.0009395794 -0.0007394833 0.0008168966 0.0007584800 0.0144855925 0.0031498150 -0.0047845109 -0.0005325541 -0.0000453284 0.0008967913 0.0012245078 -0.0001693790 -0.0016925673 -0.0051092498 -0.0018774025 -0.0003180841 0.0038479182 -0.0023527751 -0.0006349482 -0.0641109622 -0.0162901015 0.0107797404 0.0016956266 0.0035792939 0.0010331876 -0.0091804404 -0.0008783018 0.0080421477 -0.0018481453 0.0014839245 0.0001160194 -0.0002403184 -0.0008902528 -0.0016893369 0.0056069971 -0.0026997073 0.0024489250 -0.0016034237 0.0014414341 0.0004011254 0.0002445717 -0.0007518551 -0.0007397720 0.0038977137 -0.0041540503 -0.0023370126 0.0045705735 -0.0014036174 0.0010178846 -0.0194167188 0.0109785931 -0.0026301919 0.0049880134 -0.0053433260 -0.0025018224 0.0001507704 -0.0001278020 -0.0017186809 0.0161501665 0.0004100491 -0.0353247647 0.0311767946 0.0116347141 0.0278085468 0.0062746230 -0.0010143263 0.0111242995 0.0078430587 -0.0070740822 -0.0094721988 0.0014338030 0.0015998653 -0.0004387617 -0.0002966043 -0.0014699165 -0.0000957255 0.0024330685 -0.0003618987 -0.0013966304 -0.0015497307 0.0003064946 0.0009145428 -0.0044380347 0.0014055531 0.0024693364 -0.0022575725 -0.0001539343 0.0012322591 0.0023660730 -0.0005652247 -0.0014804525 -0.0009084190 -0.0003762493 0.0005051435 -0.0054422077 0.0013980461 0.0037064795 -0.0022698999 0.0041338503 0.0016764061 0.0019419063 0.0014761490 0.0011069350 -0.0008009573 -0.0025180871 -0.0004470025 0.0024952685 0.0006863032 0.0014193813 -0.0021292405 -0.0001420028 -0.0012250261 -0.0038683603 0.0015436480 -0.0025333646 -0.0012226963 0.0019293868 -0.0009081296 0.0036360268 0.0004677722 0.0019715490 -0.0007760998 -0.0013801276 -0.0003449005 -0.0082465092 0.0017633502 -0.0044481522 -0.0043747070 0.0078011242 -0.0029742271 0.0079253113 -0.0003464977 -0.0054719050 -0.0563868453 0.0438368738 -0.0838183952 -0.1306291075 0.0033590803 0.0703059459 0.0407256881 -0.0423397531 0.0959482625 -0.0096812563 -0.0016069236 0.0010652108 0.0059855498 -0.0162148221 -0.0149459384 0.0400822811 -0.0350628913 -0.0074228670 0.0411027261 0.0389405848 0.0165890281 -0.0808054428 -0.0799104080 0.0168941244 -0.2351512141 0.0562646079 0.1092272087 0.0815745507 -0.0078398917 -0.0379505606 0.1020283097 -0.0328602191 -0.0683041791 -0.0893621095 0.1041524424 0.0550601534 -0.1158041860 -0.0715615690 -0.0588573416 0.1079386987 -0.0013557747 0.0687286260 0.0803718663 -0.0189194993 0.0363005625 -0.0561105309 0.1019065362 -0.0130067594 -0.2368946932 0.0232362167 -0.1040468702 0.0367189316 0.0241787984 0.0144624803 0.0267853501 -0.0344602033 -0.0132047600 0.0082866042 -0.0002325146 0.0008978975 -0.0065614083 0.0070967900 0.0042371607 -0.0085081611 -0.0077802460 -0.0062960484 0.0163848306 -0.0141513666 -0.0259493214 0.0011028054 -0.0008071079 -0.0035560342 -0.0014548941 -0.0027674012 -0.0016404216 0.0010583048 -0.0009908897 -0.0021356074 0.0022848085 0.0034538976 0.0013668688 -0.0013383197 -0.0002447559 0.0020493737 0.0014867519 0.0028128098 0.0014764333 -0.0006271177 0.0008289743 0.0010568495 -0.0025815529 -0.0060564408 -0.0058897214 0.0031922121 -0.0033967838 -0.0105216611 -0.0037837939 -0.0105441839 -0.0065293663 0.0057514213 -0.0008922534 -0.0014972615 -0.0089378847 0.0034168005 0.0081033752 0.0042020784 -0.0103522414 -0.0101154818 -0.0002008469 -0.0014703135 -0.0027244502 0.0011101672 0.0009217210 0.0007091340 0.0009015509 0.0007980482 0.0005782086 -0.0002150480 -0.0003423226 -0.0020475695 0.0004036239 0.0006215376 0.0014547386 -0.0023532371 -0.0022582891 -0.0028240360 -0.0004220254 0.0003361965 0.0047976145 0.0097566205 0.0065295617 0.0152113563 0.0028267406 0.0012286138 -0.0041037478 0.0033113566 0.0040659109 0.0074605306 0.0015988278 0.0013072301 0.0007564750 -0.0001885861 -0.0008811862 0.0016040166 0.0033522227 0.0085336236 -0.0100715598 -0.0008580035 -0.0306886808 -0.0284653168 0.0082480193 -0.0011795887 -0.0007667378 0.0048347899 -0.0019533083 -0.0065416571 0.0005053844 0.0024610650 0.0024733120 0.0003016903 -0.0001519449 -0.0004708922 -0.0004832512 -0.0006609645 -0.0007397195 0.0007460608 0.0019809131 -0.0021364532 -0.0005227467 0.0003105754 -0.0001036077 -0.0053174318 0.0001119495 0.0033659316 -0.0028075585 0.0033168846 0.0020645107 0.0090667406 0.0051697971 0.0075299776 0.0004671727 -0.0004596782 -0.0044169335 -0.0055058267 0.0050909282 0.0075588411 -0.0095932408 -0.0309836183 0.0213425694 0.0202515801 -0.0069677496 -0.0040169632 -0.0221741180 0.0081455374 0.0138868330 0.0056587678 -0.0020043703 0.0034072286 -0.0001681082 -0.0060979081 -0.0006125769 -0.0010895391 0.0026671780 0.0012519075 0.0238196484 0.0035598398 -0.0426413816 0.0091421926 -0.0363410313 -0.0090280603 0.0203303565 -0.0284475347 -0.0003940188 0.0084465663 0.0330234796 0.0279489573 0.0553486569 0.0238470623 -0.0018671403 -0.0178336618 -0.0235323141 -0.0271605827 -0.0216766456 0.0094533776 0.0353156470 0.0333432738 0.0175740557 0.0056104270 -0.0013589792 -0.0190918536 -0.0272168983 -0.1502666786 -0.0988511898 -0.0537895317 -0.0677726846 -0.0216297553 0.0018712348 -0.0134696960 -0.0056819431 0.0049375568 -0.1191041176 -0.0684926730 -0.0354134390 -0.0546832872 -0.0087487793 0.0007229903 0.0476926857 -0.0378808583 -0.0040974969 -0.0095234741 0.0238178447 0.0308919716 -0.0264887239 0.0017923463 -0.0339713259 0.0293614149 -0.0263858526 -0.0103526525 0.0042468864 0.0156943159 0.0295222850 -0.1243023747 0.1290334119 0.0700234047 -0.0620899792 0.0405460988 -0.0007956064 -0.0084250119 0.0055656968 -0.0040659554 -0.1016853960 0.0936245154 0.0464469821 -0.0568831175 0.0235907100 -0.0022583445 0.0073599743 0.0004739698 -0.0159525393 0.0066666097 0.0029180068 0.0064346788 0.0074572754 -0.0013995300 0.0132459599 0.0033357286 -0.0033589182 -0.0045521485 0.0186261277 -0.0433670637 -0.0159140445 -0.0297515518 0.0490234909 0.0253160866 -0.0998801963 0.0369525586 0.0592507724 0.0134934214 -0.0410633772 -0.0116036972 0.2627276837 -0.0492898101 -0.1463006102 0.1764094334 0.1494734357 -0.0867608969 -0.0772270440 0.0422160301 0.0502252096 0.0599657814 -0.0202824615 -0.0373208286 0.1682302936 -0.0123659507 -0.1096926841 0.0636290052 0.0119894855 -0.0376512743 -0.0489887324 -0.0377794054 -0.0286733143 0.0351511159 0.0380805838 0.0186982376 -0.0836630461 -0.0165731217 -0.0483731357 0.0656040097 0.0032457575 0.0377994946 0.1522907996 -0.0456383996 0.1019617845 0.0469012373 -0.0465582220 0.0322257729 -0.1062672623 -0.0042578292 -0.0580215749 0.0232159062 0.0349773604 0.0107106530 0.2604490965 -0.0422429999 0.1399439321 0.1203561953 -0.2077482300 0.0815266043 0.0122444596 -0.0032382902 -0.0036742717 -0.0986428815 0.0959065260 -0.1009884143 -0.1741527511 -0.0268467893 0.0672593052 0.0712226270 -0.0134108810 0.0948826345 -0.0023531629 -0.0067457732 0.0061282787 0.0654325186 0.0202914145 0.0153379393 -0.0413335201 0.0774650672 -0.0215044507 -0.0379473613 -0.0018252948 -0.0672872711 -0.0027412850 -0.0027371629 0.0006183082 -0.0077168834 0.0019156518 0.0035893319 0.0026735922 -0.0001966018 -0.0012202555 0.0034230774 -0.0007636357 -0.0022694394 -0.0032170766 0.0034639935 0.0019437885 -0.0041335354 -0.0025440451 -0.0020865267 0.0038515218 -0.0002981640 0.0024169582 0.0029044923 -0.0006811438 0.0012988244 -0.0021763563 0.0036761617 -0.0005715894 -0.0084801305 0.0008467537 -0.0037283294 0.0014051209 0.0008681671 0.0004545024 0.0010316536 -0.0012598474 -0.0004477108 0.0001862631 0.0003489503 0.0003030331 0.0000100510 -0.0001630827 -0.0001207423 -0.0004359794 -0.0004275579 -0.0005494586 0.0098213681 -0.0036391774 -0.0113164071 -0.0069943600 -0.0061801876 0.0024670895 0.0019931831 0.0009048319 -0.0020352757 0.0019892266 0.0021872338 0.0000777433 0.0006846872 0.0018443196 0.0015993763 -0.0015952297 -0.0016159751 0.0003842022 0.0002573502 0.0010835729 0.0014638426 -0.0020610276 -0.0017656341 0.0014173762 -0.0041897545 -0.0078351716 -0.0052048297 -0.0012498360 -0.0024137055 -0.0012704672 -0.0041928933 -0.0070623036 -0.0039176850 0.0048977223 -0.0023648575 -0.0030422266 -0.0051156625 0.0033517308 0.0022879659 -0.0083099922 0.0054914221 0.0068562668 -0.0063237619 -0.0043225360 0.0009001951 -0.0045820396 -0.0026760460 0.0024466393 0.0031413427 0.0037213239 0.0052171836 0.0004931031 -0.0017299146 -0.0088558956 0.0010501130 0.0029025793 0.0091277353 -0.0020062731 -0.0036798556 -0.0105013141 0.0138849821 0.0020401067 -0.0082502503 0.0134308872 0.0107536972 0.0124108947 0.0107583049 0.0052465732 -0.0123739477 0.0190071868 0.0165697276 0.0232371895 0.0283872379 0.0191537316 -0.0030902063 0.0010238431 0.0009772545 -0.0006954878 -0.0115848257 -0.0103960510 0.0060945771 0.0001491078 -0.0010217867 -0.0006424695 -0.0079810933 -0.0038269553 0.0067988593 -0.0023723253 -0.0028224909 -0.0003838499 0.0032970527 0.0046529182 0.0016709700 0.0000942777 -0.0002344423 0.0004714409 0.0027850466 0.0017690961 0.0003525262 0.0002355428 -0.0000573616 -0.0006042816 0.0040032936 0.0056671713 0.0005154814 -0.0045697917 -0.0137757096 -0.0058340607 -0.0033279124 -0.0470872914 -0.0181185026 -0.0201454173 -0.0349401181 -0.0076315845 -0.0300511557 0.0023226036 0.0174009566 0.0102261626 0.0059564554 -0.0192857413 -0.0007568202 -0.0044747383 0.0026283017 0.0030729223 0.0017714612 0.0001274624 -0.0035062635 0.0010840617 0.0047475542 0.0252540741 0.0067416963 -0.0328048004 -0.0161530747 -0.0470277068 0.0459982880 -0.0617768535 -0.0379704524 -0.0257821299 0.1090474681 0.0817644997 0.5605533041 0.0404192112 0.6688768642 0.0402276127 -0.0295642389 0.0104907002 -0.3309176230 0.0006918607 0.0009522037 0.0003569859 0.0015201374 0.0006855547 -0.0000372457 -0.0002466966 -0.0006931525 -0.0008506877 -0.0028633102 -0.0003801306 0.0014209919 0.0008111063 0.0004961141 0.0001425548 -0.0000304394 -0.0003704994 -0.0004390162 -0.0033413466 -0.0022042925 -0.0012758520 -0.0025429177 -0.0001838364 0.0004232609 0.0093868425 0.0023598659 -0.0012155143 -0.0030498046 -0.0023381307 -0.0006991720 -0.0002632974 0.0000775570 -0.0008338444 0.0015158595 -0.0012921864 -0.0002800099 -0.0000268811 0.0007102436 0.0012138002 -0.0017531686 0.0006190686 -0.0012190213 0.0009569095 -0.0009105234 -0.0004398822 0.0001779667 0.0004602307 0.0008930995 -0.0040979197 0.0041114107 0.0021074697 -0.0028309899 0.0013015739 -0.0005122689 0.0034264251 -0.0019914296 -0.0001892448 -0.0036477989 0.0032682596 0.0015435915 -0.0018417780 0.0006973090 -0.0001591969 -0.0022426120 -0.0000390774 0.0047284235 -0.0045676485 -0.0016952212 -0.0040444760 -0.0008715959 0.0001474360 -0.0014214851 -0.0014267290 0.0013165683 0.0017812916 0.0004308996 -0.0014426739 -0.0004431520 -0.0008319618 0.0015986685 0.0007509218 -0.0030438487 0.0011359353 0.0018067763 0.0004628745 -0.0012423675 -0.0003822223 0.0078543513 -0.0014534433 -0.0043956921 0.0053145177 0.0044427857 -0.0026458562 -0.0023869558 0.0012411461 0.0015424806 0.0017993416 -0.0005526504 -0.0011155165 0.0050646474 -0.0004317005 -0.0032947860 0.0019788629 0.0001048704 -0.0012126606 -0.0018290812 -0.0013203543 -0.0010672079 0.0012978969 0.0014556185 0.0006977797 -0.0027435023 -0.0006174773 -0.0015805725 0.0022813306 0.0001572901 0.0013109717 0.0047671102 -0.0015696778 0.0031699304 0.0013663825 -0.0019800306 0.0009750072 -0.0036102532 -0.0002848438 -0.0019646643 0.0006829250 0.0013320884 0.0002936327 0.0087444853 -0.0015988162 0.0047105976 0.0042090325 -0.0075752216 0.0028597080 -0.0093016403 -0.0030201226 0.0080424889 0.0335044189 -0.0048997979 0.1078147093 0.1407561525 -0.0401242508 -0.1091289950 -0.0216285251 0.0981621993 -0.1377378706 0.0055085091 0.0002261026 -0.0058123965 -0.0116073803 0.0359605889 0.0330769387 -0.0102088588 0.0227963453 -0.0093100074 -0.0152743582 -0.0377375541 0.0306787241 0.0072708299 0.0043522318 -0.0022292793 0.0171281169 -0.0026504132 -0.0077383748 -0.0061062516 0.0017976064 0.0029822665 -0.0075748784 0.0043330607 0.0051719862 0.0061954320 -0.0081927648 -0.0037829480 0.0063263536 0.0052600954 0.0032167907 -0.0069292398 -0.0023051136 -0.0045995880 -0.0054068908 -0.0007470192 -0.0025142123 0.0062853775 -0.0043368130 0.0025415808 0.0118380639 -0.0034984478 0.0051313388 -0.0030814801 -0.0021787280 -0.0007572742 -0.0025418119 0.0030256380 0.0006573323 0.0008946590 0.0007752885 0.0008192697 0.0000037355 -0.0010289486 -0.0008445324 -0.0005198049 0.0003044207 -0.0005057082 0.0164518109 -0.0234582341 -0.0107966842 -0.0147005442 -0.0126176584 0.0067096231 0.0051735142 0.0033696511 -0.0039112967 0.0034363958 0.0060490744 0.0027957741 -0.0004279143 0.0012484312 0.0029191848 -0.0026385236 -0.0024066837 0.0008682440 -0.0011931302 -0.0004963928 0.0013125355 -0.0009143683 -0.0004547554 0.0000308423 -0.0066412405 -0.0095054882 -0.0049407193 -0.0033603422 -0.0028886671 0.0023278562 -0.0026319873 -0.0048973230 -0.0005763274 0.0027974293 -0.0035994500 -0.0050325193 -0.0050399154 0.0059002458 0.0072730450 0.0058713041 -0.0147131517 0.0066598320 -0.0081979008 -0.0073027913 -0.0047381413 -0.0027408242 -0.0023877315 -0.0013467830 0.0021793062 0.0022299741 0.0034051271 0.0018057286 0.0012058867 -0.0035962398 -0.0002313731 0.0015352570 0.0078757711 0.0007413790 -0.0002850033 -0.0034897999 0.0102678701 0.0028218845 -0.0125725375 0.0222925821 0.0052790333 0.0185409139 0.0086716468 0.0041220562 -0.0142596205 0.0056903833 0.0055910366 0.0042958038 0.0177015199 0.0111563131 -0.0052741716 0.0009298917 0.0001925820 -0.0019938497 -0.0129285007 -0.0246830237 0.0162811398 0.0000879671 0.0005996428 0.0001916253 0.0096024266 -0.0174073735 0.0104135828 0.0128335721 -0.0078687701 -0.0201512509 0.0014417285 0.0072928372 0.0074088800 0.0016569612 -0.0012241871 -0.0011485945 0.0071577015 0.0003252704 -0.0034867523 0.0010252671 -0.0036617814 0.0006141321 -0.0006981385 -0.0007007806 0.0007533033 -0.0087208025 -0.0016114665 0.0055583073 -0.0017972606 -0.0016559235 0.0021692690 0.0047066688 -0.0705882408 0.0309556199 -0.0998055967 0.0045299824 0.0162730616 -0.0125690410 0.0636598171 0.0021655870 -0.0125538113 0.0122724296 -0.0404804809 -0.0149504665 0.0449228242 0.0154948372 0.0050647506 -0.0046683831 0.0278156515 -0.0030509741 0.0012149395 -0.0045311130 0.0008436690 0.0075868529 -0.0031453568 0.0050065836 -0.0017212846 0.0002273137 0.0062116973 0.0002362074 -0.0060037999 0.0348805018 0.0138413807 -0.0173625793 0.0011113793 -0.0047165766 -0.0445956000 -0.0005450658 -0.0017216429 -0.0011888697 -0.0037076817 -0.0019783847 -0.0004643576 0.0003751866 0.0015624821 0.0023958124 0.0027106258 0.0000305878 -0.0020589008 -0.0020480213 -0.0014782675 -0.0010745411 -0.0010097741 0.0011031993 0.0023889061 0.0107714432 0.0068777652 0.0029280245 0.0072667698 0.0009654595 -0.0023755873 -0.0016175033 -0.0003359534 0.0000307714 0.0091665204 0.0048161666 0.0017192944 0.0062848268 0.0001519716 -0.0025787229 -0.0022640042 0.0025031177 0.0014489277 -0.0006433149 -0.0006978082 -0.0023119462 0.0006131986 -0.0002087652 0.0002108582 -0.0003777965 0.0013074874 0.0018476050 -0.0024602987 0.0003629376 -0.0025872243 0.0084736797 -0.0079576834 -0.0028756657 0.0068854691 -0.0034852182 0.0037366244 0.0079127292 -0.0043462973 0.0014170707 0.0053239835 -0.0050831412 -0.0001936460 0.0088575482 -0.0020648069 0.0055253807 0.0001394461 -0.0000009557 -0.0002662967 0.0006633928 0.0002486269 0.0005686888 -0.0028088884 0.0004902660 -0.0050152662 -0.0032717698 0.0028517631 0.0038338060 -0.0032710426 0.0032493188 0.0022023300 0.0033680249 -0.0038872357 -0.0026029123 0.0078848146 -0.0036792505 -0.0047508418 0.0001705023 0.0041375243 0.0002922193 -0.0222803855 0.0032719483 0.0123877200 -0.0161962694 -0.0154315554 0.0078318893 0.0058996841 -0.0036791572 -0.0038965206 -0.0053817538 0.0021303411 0.0033784813 -0.0125099652 0.0002785468 0.0081357195 -0.0047769469 -0.0042707667 0.0025524589 0.0055679028 0.0021285025 0.0033230015 -0.0057624153 -0.0018447516 -0.0030480857 0.0052263693 0.0023804010 0.0028808679 -0.0063389681 -0.0016355361 -0.0035437299 -0.0063050470 0.0042206927 -0.0041680561 0.0009199116 0.0112743877 -0.0004772645 0.0078304425 0.0017914226 0.0041804491 0.0002698342 -0.0045533980 0.0004574754 -0.0201340751 0.0051125180 -0.0109380461 -0.0101783867 0.0229745374 -0.0072325735 0.0195897287 -0.0135311505 -0.0000142886 -0.2240073573 0.2629278128 -0.1116853575 -0.2747891231 -0.1293931465 0.0276095446 0.1753132323 0.1100097891 0.0674665451 0.0248564135 -0.0268187032 0.0120158607 0.2337397122 0.2083113623 0.1818476709 -0.3164637533 0.4797799066 -0.0926288648 -0.3165042354 -0.2025259202 -0.2689483140 0.0019608513 0.1068462097 0.0254724413 0.2352732085 -0.0970835647 -0.1187198362 -0.0742106947 -0.0236740506 0.0315925861 -0.1049544935 -0.0125845367 0.0356290225 0.1222969828 -0.0811920482 -0.0650258679 -0.1402106459 -0.0429885032 -0.0678424016 0.0986752131 -0.0386291307 0.0376913166 0.0640448962 -0.0462157546 0.0292381526 0.0278392970 0.1043863533 0.0282372267 -0.2568155293 -0.0141888675 -0.1180856094 0.0321138954 0.0138620869 0.0197820453 -0.0257496361 0.0224901981 0.0186541364 0.0010206415 0.0070453042 -0.0081652575 0.0000933243 -0.0025755879 0.0033935213 -0.0012357601 -0.0023269225 0.0037574722 -0.0033083895 0.0042998450 0.0055191928 0.0106811542 0.0072729700 -0.0078791070 -0.0042034198 -0.0044341036 0.0006702627 -0.0020824363 -0.0043581765 -0.0030342210 0.0024876347 0.0019555416 -0.0012010703 -0.0000474555 0.0013740547 0.0021556975 0.0022637794 0.0029492218 0.0000637821 0.0000710611 0.0021927845 0.0020405330 0.0020486581 0.0003643876 -0.0029327052 0.0056377200 -0.0019123017 -0.0129054272 -0.0014064247 -0.0064099192 -0.0061372385 0.0002704240 0.0011801312 0.0012238867 0.0000752091 -0.0003376735 -0.0009412383 -0.0003828913 -0.0001432453 -0.0000316903 0.0018231556 0.0011521335 0.0001765516 0.0011759132 0.0007959693 -0.0000811622 -0.0005769969 -0.0007202381 -0.0012663481 -0.0005310412 -0.0001599759 0.0013589518 -0.0000812415 -0.0005847518 -0.0019074248 -0.0000047858 0.0004475394 0.0018770788 -0.0021301897 -0.0009238037 0.0015817007 -0.0037843058 -0.0012652101 -0.0025037688 -0.0030798452 -0.0006749832 0.0040533760 -0.0027994101 -0.0023108832 -0.0025829120 -0.0058641088 -0.0038982574 0.0012696558 -0.0012030018 -0.0014962633 0.0005572178 0.0182244959 0.0147337868 -0.0107146162 -0.0121862643 -0.0335502209 -0.0413496136 -0.0001792378 0.0005790167 -0.0000457278 0.0005086733 -0.0001565309 -0.0006019854 0.0000294914 0.0000651546 0.0001918614 -0.0001366788 0.0000276430 -0.0001820036 -0.0006660572 -0.0005413921 0.0000769016 0.0006042969 -0.0000763656 -0.0003611259 -0.0000522692 -0.0000011062 -0.0000522354 -0.0003991087 -0.0000342139 0.0002000439 -0.0003210571 -0.0000133794 -0.0000529549 0.0046111872 0.0090807032 0.0013307493 0.0076307175 -0.0006379796 -0.0049947540 -0.0022472885 -0.0012843784 0.0043124290 -0.0036347285 -0.0046272701 -0.0012911821 0.0012298983 0.0041005170 0.0010828554 -0.0042022538 0.0012934376 0.0062501389 0.0009626629 -0.0006617887 0.0018133937 0.0003081569 -0.0012309190 -0.0008747383 0.0002652058 0.0015791345 0.0008796202 0.0037090615 0.0012148222 0.0004055736 -0.0002332654 0.0013689166 0.0001291846 0.0019837018 -0.0030777033 -0.0008969486 0.0031014134 -0.0399546018 -0.0418800576 -0.0425482104 -0.0101041105 0.0138440488 0.0249937259 0.0200632246 0.0145634588 0.0034790063 -0.0224014768 -0.0456398695 -0.0310197194 -0.0047345041 0.0158493721 0.0272978386 0.0200512432 0.0072025387 0.0949465030 0.0681483869 0.0535600396 0.0042691200 0.0205694559 0.0444526595 0.0066313946 0.0047330033 -0.0058118319 0.0613729233 0.0487844001 0.0456977364 -0.0290164630 0.0115620098 0.0740322528 0.0371284124 -0.0207687913 0.0101942943 -0.0177314504 0.0229971046 0.0169689810 -0.0101148616 -0.0150842389 -0.0447661032 0.0283924614 -0.0138489992 0.0127692351 -0.0204619930 0.0242572917 0.0094958142 -0.0726383536 0.0795090672 0.0617995960 -0.0005995693 0.0176030325 0.0416617537 -0.0048401872 0.0035907888 -0.0053499317 -0.0453491636 0.0544763027 0.0497742356 0.0267037528 -0.0027258850 0.0673480060 -0.0056595095 -0.0006847954 0.0120684426 0.0002365295 -0.0005725100 -0.0006234447 0.0060110144 -0.0013223356 0.0105844749 -0.0010189623 0.0004317506 0.0004472044 0.0919486987 -0.0114392579 -0.0490698202 -0.0689237125 -0.0101008034 0.0401330735 0.0447362868 0.0309055283 -0.0221327484 -0.0745133737 -0.0027153385 0.0423497535 -0.0591203205 0.0686087252 0.0395431260 0.0443831733 0.1647822448 -0.0094690474 0.0791281732 0.0258588887 -0.0472271722 0.0130690264 -0.0871931844 -0.0152980594 -0.2239927795 0.1107689641 0.1637359383 -0.1005389483 0.3545396309 0.0897878596 0.0560053004 -0.0332966874 0.0347793843 -0.0873955980 0.0195260414 -0.0453582377 -0.0696509178 0.0484007669 -0.0472522624 -0.0353003078 -0.0750783334 -0.0142905216 0.2590903380 0.0249424402 0.1754689010 0.2056860805 0.2916069734 0.0944458267 -0.0363940334 0.0440103719 -0.0228008188 0.0696195408 -0.0271716283 0.0409375470 0.0861251612 0.0439925363 0.0443480241 0.0132160380 0.1606465344 -0.0026190346 -0.0002062718 0.0004211425 -0.0001943930 0.0042214853 -0.0061175923 -0.0007883032 0.0023693734 0.0039637713 0.0023380329 -0.0037104116 -0.0054170082 0.0021452278 -0.0012840816 0.0000726094 -0.0007118516 -0.0063125161 0.0004247197 0.0010931080 0.0130216849 -0.0092032459 -0.0029037723 0.0103237819 0.0036051937 0.0138217047 -0.1136407314 -0.0284030788 0.0439089452 -0.1710329414 0.0112804658 0.0771385899 0.0679400058 -0.0292661952 -0.0340815060 0.0942763021 -0.0412111016 -0.0412102004 -0.0063253101 0.0749133302 0.0090418591 0.0168124044 0.0682424853 0.0059224586 -0.0979909201 -0.0180811629 -0.0387796663 -0.0687109114 -0.0098239143 -0.0311275052 0.1019675064 -0.0553282259 0.0415769370 0.1454336661 -0.0466715230 0.0639551438 -0.0040504711 -0.0109924074 -0.0022890413 0.0029858935 -0.0140210620 -0.0031569690 0.0001479938 -0.0035569733 0.0018337637 -0.0004656053 0.0019535673 -0.0003664833 -0.0001181323 0.0007204286 -0.0012026996 -0.0005125919 -0.0004331206 -0.0000722569 -0.0026140295 -0.0018166913 0.0018070842 0.0008655346 0.0008803002 -0.0001517106 0.0003860741 0.0011011610 0.0008590322 -0.0004104617 -0.0001535262 0.0004341346 0.0000439594 -0.0004729654 -0.0007081301 -0.0004658837 -0.0004534583 0.0001801479 -0.0001836133 -0.0007460820 -0.0005306488 -0.0007958414 -0.0006335675 0.0001941610 -0.0015004549 0.0004310674 0.0029153446 0.0007826177 0.0003134998 0.0017227719 0.0004301021 -0.0005004128 -0.0006612915 -0.0001403027 0.0002085805 0.0004494594 0.0000018941 0.0003117307 -0.0000092691 -0.0008403032 -0.0005226037 0.0001739134 -0.0007208061 -0.0004163860 0.0002439692 0.0004653492 0.0004870052 0.0007267524 0.0001102600 -0.0001737450 -0.0011245312 0.0001408628 0.0003883605 0.0011988385 -0.0001902497 -0.0004755274 -0.0013890806 0.0008678832 0.0012339856 -0.0006462644 0.0019298607 0.0007712411 0.0012962072 0.0017282605 0.0004377157 -0.0018059901 0.0021905638 0.0022747348 0.0026789966 0.0038347845 0.0025105626 -0.0005280086 0.0004334231 0.0004583657 0.0000002368 -0.0050557740 -0.0034575737 0.0020111489 -0.0008260040 0.0014198715 -0.0027572886 0.0002432923 0.0000210930 -0.0001764705 -0.0005288367 0.0000590428 0.0004644325 0.0000247498 -0.0000585041 -0.0000808221 -0.0000371151 -0.0000218954 -0.0000045971 -0.0005001236 -0.0000784041 0.0000797406 -0.0000526821 -0.0001765291 0.0000999065 -0.0000049821 -0.0000097267 0.0000027588 0.0002744018 -0.0000156935 -0.0001543819 0.0003319384 -0.0002199139 -0.0002053397 0.0013749299 0.0046317470 -0.0001760251 0.0060623299 -0.0003125005 -0.0018891937 -0.0002108633 -0.0027802085 0.0012475906 0.0004804439 0.0015174822 -0.0012151607 -0.0009975069 0.0007631220 0.0003584360 0.0008375129 -0.0003091052 -0.0003605601 -0.0002537084 0.0000385356 0.0000644678 0.0000829782 0.0002983067 -0.0002020809 0.0002885817 0.0000503170 0.0000533959 -0.0024922619 -0.0005656969 0.0026356151 -0.0006155471 0.0019416251 0.0005355792 -0.0016940171 0.0025687898 0.0001857930 0.0052398080 0.0036847461 -0.0022655053 0.0377833282 0.0283263500 0.0176118594 0.0115430060 -0.0146114395 -0.0347810564 -0.0426364790 -0.0123459991 0.0098613432 0.0165655618 0.0226972039 0.0280672627 0.0341093818 -0.0066154086 -0.0382299870 -0.1318497505 -0.0771829809 -0.0182972224 -0.1238583587 -0.0085631560 0.0721208104 0.0170237787 0.0043009990 -0.0035924925 -0.1211673473 -0.0553631497 -0.0021610393 -0.1325319107 -0.0017315070 0.0985333327 -0.0296717078 0.0368105798 0.0242335369 -0.0177214705 -0.0066596861 -0.0375629391 0.0397145538 -0.0252528538 0.0053474618 -0.0129781284 0.0265681815 0.0335913567 -0.0363957397 0.0059219444 -0.0398518796 0.1168834976 -0.1125678236 -0.0322899402 0.1192925038 -0.0493129723 0.0691610119 -0.0077884029 0.0042662702 -0.0018080011 0.1124649242 -0.0892728662 -0.0140060548 0.1381493203 -0.0476998264 0.0977646565 -0.0022546311 -0.0001648057 0.0046451711 -0.0038219463 -0.0014175476 -0.0034567359 0.0000758559 -0.0000758119 -0.0000540055 -0.0004664750 0.0005028351 0.0006066988 0.0687415101 -0.0552067798 -0.0444015608 -0.0868801559 0.0423223003 0.0536429893 -0.0636662494 0.0654988329 0.0419410628 -0.0485953504 -0.0681088832 0.0214892978 0.2337165436 0.0052940315 -0.1273489940 0.2322309703 0.2810550834 -0.1061159338 -0.0273955393 0.0498259887 0.0215047532 0.0676106755 -0.0463157457 -0.0441890989 0.0560731438 0.0421298933 -0.0298758974 0.0189883506 0.1918562514 0.0037567364 0.1026416589 0.0093661874 0.0576637707 -0.0915359608 -0.0274187337 -0.0491499939 0.0382179629 0.0421040361 0.0198358327 -0.0836410781 -0.0277367244 -0.0463282562 -0.0253995415 0.0617887882 -0.0206186426 0.0585913431 0.2122391438 0.0146585215 0.0803619935 0.0440028525 0.0415391192 0.0298360123 -0.0826740867 0.0224118088 -0.2183913028 0.0857900734 -0.1221080024 -0.1322107854 0.3582065575 -0.0979718545 0.0000568320 -0.0001220814 0.0000475402 -0.0011638210 0.0014534398 -0.0002057650 -0.0008645454 -0.0007929750 -0.0002309666 0.0009960997 0.0011261522 -0.0001492177 -0.0000573517 0.0000337238 0.0005379163 0.0029266671 -0.0036154710 -0.0037654376 -0.0022697232 -0.0004040901 0.0018479053 -0.0005054482 0.0029720990 -0.0059590219 -0.0528509049 0.0984483050 0.0459826434 0.1081720700 -0.0947388822 -0.0611606477 -0.0391127612 -0.0501059159 0.0125737396 -0.0362856284 -0.1180868361 0.0026131488 0.1139268250 -0.0397815392 -0.0608576088 0.1275606061 0.0090777955 0.0658545717 -0.0087913702 0.1237066776 -0.0063768443 -0.0316663375 0.0615677817 -0.0144804916 -0.0713346998 -0.0853016659 -0.0447793256 0.1583164270 0.0507833855 0.0739015122 -0.0375621965 -0.0114522983 -0.0157396335 -0.0303257873 0.0205036761 0.0138181709 -0.0069378124 0.0002479342 -0.0002237570 0.0055501898 -0.0059137897 -0.0036784138 0.0070063425 0.0063378606 0.0046882973 -0.0088889019 0.0057814213 0.0164784885 -0.0039972140 -0.0015199673 0.0050561585 0.0023868455 0.0034449296 0.0010356903 -0.0005659298 0.0030197138 0.0041827696 -0.0026055709 -0.0035460146 -0.0008654934 0.0010028868 -0.0004974251 -0.0025036829 -0.0018706099 -0.0027460680 -0.0008996443 0.0013849073 -0.0002104464 -0.0018627439 0.0016007854 0.0053814499 0.0058451087 -0.0042051066 0.0029294012 0.0112718821 0.0044129647 0.0088343942 0.0077004971 -0.0039994574 -0.0007125164 -0.0005798768 0.0069958073 -0.0004219161 -0.0056832293 -0.0017555794 0.0013236123 0.0186910725 -0.0058938246 -0.0033603489 0.0013516476 -0.0052485977 -0.0037679991 -0.0004482537 0.0007195022 0.0014176262 0.0038100844 0.0021868514 0.0007449678 -0.0027191681 0.0000089997 0.0012649068 0.0053453973 0.0027865034 0.0012058393 -0.0028314729 0.0086480149 0.0027782416 -0.0134618575 0.0029020818 0.0005227597 -0.0050643718 0.0069155965 0.0025350934 -0.0103037190 0.0051772724 0.0039972206 -0.0000073617 0.0182395004 0.0112634341 -0.0048868500 0.0001100569 0.0005441823 -0.0014776003 -0.0055198991 -0.0105017546 0.0110168804 0.0094605223 0.0306338028 0.0336396925 -0.0024976569 -0.0015436744 0.0030395302 0.0034838771 -0.0018444339 -0.0049216866 0.0000692626 0.0008627029 0.0011698892 0.0000995047 0.0001798445 0.0000358866 0.0014564995 0.0006485450 -0.0002273347 -0.0002881250 -0.0012608964 0.0013257399 0.0000288793 -0.0003811623 0.0000383607 -0.0009708782 0.0001551502 0.0008979387 -0.0011761698 0.0007368098 0.0015361741 -0.0065020621 -0.0174939700 -0.0000696423 -0.0162217373 0.0009052424 0.0086066910 0.0024277115 0.0051167439 -0.0054624328 0.0030651880 0.0152292486 -0.0143015662 -0.0105709629 0.0061291393 0.0031193402 0.0097476514 -0.0039720399 -0.0059391221 -0.0016453438 0.0002943447 -0.0008362922 0.0003738166 0.0028566801 -0.0008319230 0.0014013880 0.0001953461 0.0003734046 0.0024214682 -0.0005869903 -0.0144354799 0.0081626385 -0.0105575725 -0.0050715358 0.0017537909 -0.0036125710 -0.0036691888 0.0027623535 -0.0346478122 -0.0341833265 -0.0170231952 0.0053518257 0.0193364512 0.0250960316 0.0101764721 -0.0029775484 -0.0185163166 -0.0262931673 -0.0355394512 -0.0148795474 0.0091826835 0.0278977335 0.0391324178 0.0131572134 -0.0142608236 0.0166075943 0.0170952422 0.0364431573 -0.0524772447 0.0126557658 0.0699538423 0.0126626814 0.0056194027 -0.0071214798 -0.0129676889 0.0103951318 0.0363350685 -0.0905239265 0.0049156905 0.1122169392 -0.0181884015 0.0018582110 -0.0174967358 0.0202872367 -0.0161010488 -0.0002577507 -0.0087036118 0.0245999731 0.0370392649 -0.0158940231 -0.0020836057 -0.0257003098 0.0317607085 -0.0222148726 0.0102164075 0.0137591285 -0.0171146148 -0.0379813299 -0.0449990677 0.0048332246 -0.0608762622 0.0085666443 -0.0051996536 0.0062192079 -0.0131590446 -0.0037296251 -0.0340903394 -0.0792110788 0.0259800390 -0.0973253728 -0.0057317016 -0.0006325546 0.0120456787 -0.0007880099 -0.0008037268 -0.0013723791 -0.0056735305 0.0012175374 -0.0098553675 0.0007897488 -0.0004361665 -0.0004216897 0.1407269499 -0.0162173890 -0.0765367469 -0.1055928294 0.0170394183 0.0650987482 -0.0251650434 0.0627689230 0.0199345134 -0.0841399042 -0.0550822990 0.0430169812 0.1681106153 0.0326178306 -0.0884061467 0.2006581596 0.3099824252 -0.0854213739 0.0055497307 0.0581098421 0.0020871809 0.0705464570 -0.0881543135 -0.0495887655 -0.0422564980 0.0850385471 0.0389451844 -0.0278182640 0.3389156409 0.0448052108 -0.0991409368 0.0216926424 -0.0607562616 0.1364384434 -0.0350531348 0.0726824726 -0.0082283310 -0.0557872437 -0.0001546607 0.0907268420 0.0618400723 0.0476400979 -0.0792260491 -0.0626580699 -0.0496147968 -0.1391872511 -0.3076791204 -0.0541337929 -0.0371241994 -0.0486951122 -0.0172273170 -0.0625097944 0.0734977125 -0.0401157908 0.1314884887 -0.0808723400 0.0747000823 0.0817033631 -0.3373420769 0.0681447849 0.0009269305 -0.0002268412 -0.0000561980 -0.0070110747 0.0100956243 -0.0012176283 -0.0084754914 -0.0067284862 -0.0020866189 0.0045910280 0.0048190894 -0.0010610934 0.0045119232 -0.0014659028 -0.0034969312 -0.0072776023 0.0403256972 0.0396915846 -0.0179973121 0.0404955376 -0.0144438480 -0.0285391051 -0.0448354583 0.0204188235 0.0009448592 -0.0012545873 -0.0006710328 -0.0014995662 0.0012424455 0.0008527389 0.0005172829 0.0006373443 -0.0001805051 0.0003626089 0.0017449963 -0.0000746381 -0.0018653029 0.0007322640 0.0011439633 -0.0031072484 -0.0008543374 -0.0013987062 0.0010584582 -0.0019564205 0.0005376513 0.0013433815 -0.0008997138 0.0006045033 0.0002828932 0.0018734198 0.0003265255 -0.0042350844 -0.0003369537 -0.0019132182 0.0012461945 0.0002742457 -0.0000111926 0.0008405709 -0.0008881752 -0.0004936963 -0.0014315721 0.0021544623 0.0019063907 0.0017415134 -0.0026866696 -0.0023683397 0.0008047348 -0.0016941631 -0.0009278647 -0.2436131041 0.2116635529 0.3227600770 0.0896983298 0.0702557368 -0.0496640814 -0.0365560278 -0.0293788266 0.0193676361 -0.0315259627 -0.0298803518 -0.0064956016 0.0135277309 0.0028745846 -0.0174040384 0.0107328542 0.0120754207 -0.0014986999 0.0122455000 0.0113737943 -0.0056157586 0.0046813274 0.0149013932 0.0118521542 0.0287703532 0.0340488840 -0.0013658092 0.0305011869 0.0044024120 -0.0465828169 0.0170761582 -0.0040714656 -0.0121368148 -0.0332835950 0.0078768022 0.0141297772 0.1087375876 -0.0094165954 -0.0779229738 -0.0608731754 0.0778923234 0.3000643233 -0.1126255272 -0.0649885342 0.0264334406 -0.1033179605 -0.0696834447 0.0100322527 0.0186340090 0.0344483867 0.0886654568 0.0423984882 0.0113069303 -0.0729940105 0.0108902908 0.0317431316 0.0987197445 0.0330334938 -0.0004976426 -0.0945777445 0.1603451593 0.0609244172 -0.2111636051 0.1130670493 0.0763050510 0.0204516285 0.1638613848 0.0570515373 -0.2376460940 0.1466126500 0.1226387540 0.0770240038 0.3761551574 0.2415650987 -0.0797606422 -0.0035659238 -0.0055285953 -0.0006732726 0.0636749395 0.0559858904 -0.0330637388 -0.0001828070 -0.0004891168 -0.0004178347 -0.0062571631 0.0034950707 0.0153149086 0.0040679330 0.0047955486 0.0022685647 -0.0020526423 -0.0063225586 -0.0043403078 0.0002816045 0.0006478314 0.0001609579 -0.0033662304 -0.0025451655 0.0003960742 -0.0004489334 0.0010326588 -0.0016569681 -0.0002669800 -0.0000426322 -0.0003507453 -0.0000260926 0.0008697191 0.0008021229 -0.0038740727 0.0034230381 0.0068586907 0.0199195264 0.0452720875 0.0026758867 0.0336469593 -0.0026021190 -0.0226910469 -0.0089943973 -0.0036794227 0.0148374379 -0.0026946286 -0.0158139256 0.0150607801 0.0134026986 -0.0035993073 -0.0024916056 -0.0088427206 0.0033710290 0.0080818656 0.0000469825 -0.0009452473 0.0036281757 0.0003612234 0.0003716558 -0.0014876830 0.0025993086 0.0030144527 0.0015020682 0.0015326929 -0.0039385131 -0.0529065121 0.0362014253 -0.0382794034 -0.0207497699 0.0036419500 -0.0070402993 -0.0196764032 -0.0002780872 0.0000772016 0.0000154376 0.0008012513 0.0002896264 0.0000866179 -0.0003974647 -0.0004955267 -0.0000286211 -0.0002717333 0.0002091918 0.0005115441 0.0006723615 0.0002488010 -0.0004780425 -0.0009940048 -0.0000705371 0.0006171136 -0.0016882560 -0.0013920077 -0.0003224676 -0.0008475918 0.0021386203 -0.0020646563 0.0005765440 0.0000546150 0.0008406326 -0.0006763141 -0.0018672183 -0.0008318846 0.0019925663 0.0000645577 -0.0021971233 0.0001951498 -0.0001031171 0.0000133358 0.0002529963 0.0001040749 0.0004936378 -0.0005984847 0.0000703128 -0.0005739338 0.0001616153 -0.0001457427 -0.0000073676 0.0000868523 0.0001221670 0.0002093295 -0.0009804465 0.0005414215 0.0006002381 -0.0005175288 0.0004140585 -0.0001187063 0.0011689450 -0.0005991486 0.0005420575 0.0001356385 0.0001207387 0.0000237050 -0.0008255206 -0.0003001947 0.0001846205 0.0000419542 -0.0001058452 -0.0003995119 -0.0004485265 -0.0001401616 -0.0002596072 -0.0004579223 0.0000586819 -0.0008183869 -0.0004604887 0.0003709468 0.0004439736 -0.0020559490 0.0002873535 0.0011223931 0.0016453606 -0.0002140258 -0.0009876926 0.0003774239 -0.0009513744 -0.0002924927 0.0012624397 0.0008606999 -0.0006372416 -0.0026155956 -0.0004706917 0.0013389508 -0.0030909681 -0.0046864978 0.0013082171 -0.0000530351 -0.0008940829 -0.0000500914 -0.0010678227 0.0012707050 0.0007519877 0.0003340119 -0.0012203689 -0.0004149225 0.0003449909 -0.0049600623 -0.0006383526 0.0011601742 -0.0005582582 0.0007256874 -0.0017201539 0.0007818254 -0.0009070043 -0.0003923598 0.0007936187 -0.0003006270 -0.0009687654 -0.0011012814 -0.0004728159 0.0021389719 0.0007224870 0.0013487107 0.0024754971 0.0042967732 0.0010743777 -0.0001705777 0.0005426313 -0.0001307757 0.0009938824 -0.0005454664 0.0005954391 -0.0001023607 0.0007165374 -0.0001056902 -0.0001797718 0.0030402945 -0.0003010357 -0.0002869796 -0.0053116372 -0.0032865705 -0.0185791629 0.0364869111 0.0249752008 0.0014554606 -0.0128560676 -0.0145748310 0.0224562473 0.0343575970 -0.0217485952 0.0012819644 0.0061039713 0.0153369656 0.0749826492 -0.1472178524 -0.1533456345 -0.0655019599 -0.0681230695 0.0899942628 0.0102309153 0.1208595689 -0.1946452417 -0.0002905448 -0.0030289230 -0.0005223026 -0.0062796719 0.0027369818 0.0030093515 0.0024760480 0.0006855093 -0.0010493242 0.0023315033 0.0024822151 -0.0008921120 -0.0044852307 0.0029906656 0.0024232925 -0.0044686319 -0.0008778880 -0.0023436226 0.0007164689 -0.0031090716 0.0006046749 0.0016099114 -0.0012814741 0.0007441329 0.0009137530 0.0024134693 0.0007452364 -0.0052766543 -0.0006799045 -0.0023860845 0.0021248318 0.0009708604 0.0003757571 0.0018399932 -0.0013996126 -0.0003451640 -0.0009410514 -0.0011887857 -0.0007349141 -0.0002979707 0.0009648971 0.0006428747 0.0017610578 0.0011382323 0.0003179267 -0.0423102258 0.0607788087 0.0297302174 0.0008412952 0.0008801595 0.0007122462 0.0001982879 0.0007892569 0.0006441007 -0.0052407034 0.0008862951 0.0050986416 -0.0001926317 -0.0017683288 -0.0022829752 -0.0003825114 -0.0011946656 -0.0010868993 0.0020476483 0.0020433469 -0.0003095165 -0.0008009934 -0.0009877205 0.0027265137 0.0013058132 0.0005675415 -0.0002094980 0.0000385241 -0.0012396232 -0.0024241360 0.0022323615 0.0009697775 -0.0006976431 -0.0048466587 -0.0020259100 -0.0014614850 0.0180892472 0.0013191177 -0.0166744817 -0.0093151013 0.0075307773 0.0603643869 -0.0204552913 -0.0125298297 0.0050706345 -0.0199079458 -0.0135760944 0.0016714703 0.0029483868 0.0061453035 0.0163133387 0.0076034293 0.0024855020 -0.0131932468 0.0022044012 0.0059627691 0.0180048623 0.0070369694 0.0011179388 -0.0160592054 0.0313319220 0.0092925442 -0.0401531998 0.0236588540 0.0080824425 0.0045208483 0.0300224416 0.0107272567 -0.0435462885 0.0261081505 0.0208021895 0.0113314067 0.0692462574 0.0438356881 -0.0150261365 0.0025528653 0.0035897209 -0.0022992807 -0.0336516018 -0.0265864813 0.0163166871 -0.0002190090 -0.0007370095 -0.0006272835 -0.0243451290 -0.0043119095 0.0068947761 0.0442585018 -0.0018475962 -0.0350949928 -0.0015899975 0.0035753648 0.0063783267 0.0005272229 0.0016722069 -0.0003190376 0.0079004772 0.0054658392 -0.0003174852 -0.0007535362 -0.0007590180 0.0003372775 -0.0002059515 -0.0011293894 0.0006397716 -0.0205921675 -0.0026958734 0.0111621980 -0.0130064813 0.0058441986 0.0138907273 -0.0524284741 -0.1112181216 -0.0100240065 -0.0823921401 0.0055783306 0.0584381626 0.0244283372 0.0103183872 -0.0424719521 0.0041471203 0.0012037338 0.0068739955 0.0057909176 -0.0063566680 -0.0012506115 -0.0024954734 -0.0000735102 -0.0076204642 -0.0014920173 0.0008649084 -0.0057424220 0.0003777937 0.0055241929 -0.0005220042 0.0001913439 -0.0009470009 0.0003831316 0.0684056073 0.0102901795 -0.1169952298 0.0852796743 -0.0626110418 -0.0488109302 0.0444945645 -0.0728492086 -0.0745428984 -0.0001927254 0.0007377847 0.0005025547 0.0010481170 0.0003992045 0.0000389030 -0.0001570386 -0.0005173998 -0.0005569896 -0.0004443762 0.0003645031 0.0010298172 0.0007353542 0.0001473362 -0.0003530220 -0.0006442127 -0.0003732484 0.0000469213 -0.0030152647 -0.0014066894 -0.0011851814 -0.0012549150 0.0006230515 -0.0009016224 0.0007801621 0.0002696624 0.0008081752 -0.0014747157 -0.0012483589 -0.0010426674 0.0008210305 0.0000922877 -0.0018515505 0.0010912761 -0.0006478665 0.0002321714 -0.0006923342 0.0006302774 0.0001645702 -0.0010419794 0.0001523625 -0.0012435050 0.0006579718 -0.0001777205 0.0005392896 -0.0007392176 0.0006161433 -0.0001669560 -0.0011910611 0.0012481738 0.0013825556 0.0005903072 0.0001109072 0.0014969874 0.0047591194 -0.0027082339 -0.0004796138 -0.0012397394 0.0018295254 0.0014682578 0.0023939580 -0.0007647867 0.0029012616 0.0000291544 -0.0000454546 -0.0002876844 -0.0005743883 -0.0002545061 -0.0004898803 -0.0012419683 0.0002248313 -0.0018865059 -0.0020738593 0.0018344565 0.0025368049 -0.0031073365 -0.0001879157 0.0015830038 0.0022942421 0.0001959924 -0.0013335558 -0.0006873365 -0.0008407775 0.0003093365 0.0020347036 0.0005001929 -0.0011201054 -0.0004927986 -0.0012484468 0.0000275046 -0.0020619435 -0.0049350422 0.0006008784 -0.0010241702 -0.0010333425 0.0005161454 -0.0009812066 0.0021786036 0.0007684160 0.0029425019 -0.0023594031 -0.0022698793 0.0014621091 -0.0080384328 -0.0016291814 0.0022381261 -0.0007198966 0.0013575668 -0.0029163955 0.0010117695 -0.0015555031 -0.0002160400 0.0013128044 -0.0002326339 -0.0018550894 -0.0016298532 -0.0009478466 0.0023897515 0.0013573439 0.0013818431 0.0036423011 0.0069982851 0.0014228633 0.0002005990 0.0009915066 0.0000421782 0.0015310735 -0.0012122304 0.0009402169 -0.0013979076 0.0014542686 -0.0008329505 -0.0009966365 0.0062686733 -0.0010270852 0.0055643959 0.0074487676 0.0014828769 0.0217390330 -0.0324750672 -0.0304258256 -0.0190241260 0.0068445930 0.0162642153 -0.0403360393 -0.0542656690 0.0170099090 0.0136383742 -0.0012614744 -0.0532974007 -0.3005483899 0.3481316536 0.3704877179 0.1810832230 0.0630135781 -0.1682270028 0.0040956376 -0.3407207919 0.5919028185 0.0000108636 0.0001605117 0.0000274738 0.0002470956 -0.0001329861 -0.0000364659 -0.0000361616 -0.0000794848 -0.0000079207 -0.0000846857 0.0001645439 0.0000479401 0.0000372002 -0.0001250792 0.0000303173 0.0001035807 0.0000175741 0.0001042834 0.0002171485 -0.0000129900 0.0000940533 -0.0001152668 -0.0001113589 -0.0000958443 -0.0001343648 0.0003169481 -0.0000438602 -0.0004304790 -0.0000525844 -0.0000678414 -0.0002044250 -0.0002408277 -0.0000073782 -0.0000288584 -0.0001647093 -0.0001049040 0.0002972597 0.0013802667 0.0008631146 0.0007296601 -0.0015383249 -0.0009339167 -0.0012892265 -0.0010607599 -0.0005736769 0.0371479245 -0.0488098851 -0.0505729119 -0.0277816280 -0.0170011652 0.0222410248 0.0105052427 0.0122108249 0.0002560160 0.0107539552 0.0115539508 0.0031974393 -0.0078334023 -0.0061888845 0.0041004426 0.0018715917 -0.0052844566 -0.0111365144 -0.0073252135 -0.0059799915 0.0041710821 -0.0004678403 -0.0064418844 -0.0112511036 -0.0043787991 0.0043597871 0.0131086069 -0.0182999013 0.0063989080 0.0418731817 -0.0016218151 0.0101714687 0.0160055605 -0.0025774663 -0.0007772783 0.0015257371 -0.0071293266 0.0020396095 0.0078114887 0.0220129238 -0.0208914376 -0.0338903652 0.0081363705 0.0029977878 -0.0083469518 0.0079074780 0.0040798448 -0.0056385262 -0.0045658346 -0.0039293476 -0.0049308033 0.0011192089 0.0025753863 0.0095917502 -0.0047120382 -0.0044877003 -0.0035358865 0.0009259409 0.0039681631 0.0120248960 -0.0057510185 -0.0098761783 0.0070479533 -0.0171276653 -0.0075834623 -0.0175777916 -0.0080254524 -0.0043314609 -0.0013212321 -0.0169694602 -0.0187401974 -0.0203987962 -0.0297747004 -0.0199627572 0.0001965322 -0.0005135883 0.0002009480 0.0040066931 0.0265151807 0.0267017572 -0.0139148867 0.0002890413 -0.0000801944 0.0003585282 -0.0571457014 -0.0143732614 0.0231134680 0.1714982777 0.1455778889 0.0526896750 -0.0334541017 -0.0730405142 -0.0563334706 -0.0016623966 -0.0037357811 -0.0014144606 -0.0017614941 0.0005477032 0.0005377042 0.0014416294 0.0021803827 -0.0000444768 -0.0008107280 0.0030017333 0.0013497306 -0.0902257746 -0.0303757075 0.0273337772 -0.0520550409 0.0180647494 0.0551201815 0.0279576010 0.0478891326 0.0111893861 0.0252595805 0.0028695742 -0.0510041325 -0.0153544900 0.0042910955 0.0294930298 -0.0080633580 0.0067653493 -0.0218152001 -0.0126994986 0.0224880329 0.0060132103 0.0218079424 -0.0037426819 0.0238030769 -0.0305754465 0.0057436788 0.0210747575 0.0116769106 0.0200231981 -0.0255713641 0.0346285134 0.0057705439 0.0036937813 0.3403390790 0.0883173863 -0.2911761746 0.3593968783 -0.0318959209 -0.1755524819 0.2164991639 -0.3355339232 -0.4491655295 0.0000454589 0.0000768658 0.0001353479 -0.0002065652 -0.0001198584 -0.0001056734 0.0001006904 0.0000826705 -0.0000454808 -0.0005439885 -0.0001692673 0.0001345770 -0.0001758080 -0.0000771690 0.0001062749 0.0002969466 0.0000295213 -0.0001845681 0.0007997020 0.0002344782 0.0002232088 -0.0000154861 -0.0004233549 0.0005710039 0.0023027054 0.0005083497 -0.0012564352 0.0001179339 0.0005183367 0.0000935119 -0.0003628644 0.0001657715 0.0002823179 0.0000043022 0.0000254654 -0.0000630956 -0.0004098772 0.0000543124 -0.0006118889 0.0021099546 -0.0011561526 0.0006829705 -0.0001241288 0.0002543361 0.0003253589 -0.0004132911 0.0000866486 -0.0004241896 -0.0000204289 -0.0003029043 -0.0000123159 -0.0004571939 -0.0010760724 0.0005572641 -0.0079474938 0.0040001393 -0.0014337081 0.0002904034 -0.0003699614 0.0002049428 0.0009849203 -0.0001682526 0.0005650444 -0.0007421306 -0.0000256100 0.0016839603 -0.0009654818 -0.0003091356 -0.0007368660 0.0027165206 -0.0003410102 0.0043332996 0.0031008034 -0.0024203027 -0.0033997915 0.0000499757 0.0000072635 -0.0000144760 0.0000087635 -0.0001056909 -0.0000174172 0.0001100474 0.0000475951 -0.0000578744 -0.0001434460 -0.0001275150 0.0000702513 -0.0000376326 0.0001228997 0.0001005986 0.0001111832 0.0001794594 0.0000223637 0.0000835759 -0.0000291889 -0.0000559436 -0.0000245921 0.0000711297 0.0000225522 -0.0003285514 0.0000931788 0.0002927115 -0.0000103251 0.0001236694 0.0000782167 -0.0002774950 -0.0000381450 -0.0001609414 0.0002290343 0.0000537629 0.0001394475 -0.0000354407 -0.0001105842 -0.0000175698 0.0001993649 0.0001658425 0.0001022116 -0.0000143728 -0.0001195705 0.0000960667 -0.0002600974 -0.0004940002 -0.0000492633 -0.0000828191 -0.0000792606 -0.0000462468 -0.0000580977 0.0000038658 -0.0000337981 -0.0000406438 -0.0001028877 0.0000559499 0.0000575625 -0.0004417137 0.0001192574 0.0059503789 0.0075899240 0.0015195210 0.0946873390 -0.0809048927 0.0559264553 0.1094567842 -0.0029207425 -0.0601478322 -0.1144449417 -0.0395484259 -0.1121662804 0.0226458595 0.0160230784 0.0110585180 0.0549266724 -0.0960127529 -0.1107359880 -0.1216364411 0.0008826010 0.0989856111 -0.0712200455 0.0298551424 -0.1886954806 -0.0001394551 0.0004771094 0.0001072711 -0.0000388238 -0.0002430266 -0.0000883314 -0.0001016555 -0.0001760804 0.0000616259 -0.0000700807 -0.0011352210 0.0001090509 0.0008345122 -0.0005727654 -0.0004451596 0.0051680695 0.0015385944 0.0024481269 -0.0016379195 0.0021582156 -0.0007855943 -0.0028886573 0.0006602675 -0.0013697402 0.0002429237 -0.0019463837 -0.0000700932 0.0070484328 -0.0004884454 0.0032302722 -0.0018410874 -0.0009161977 -0.0013359616 -0.0004955410 0.0005354386 -0.0000995765 0.0001837103 0.0012322522 0.0021526198 0.0008650171 -0.0009262094 -0.0008702004 0.0010667800 0.0014412366 -0.0039009111 0.0223084119 0.0544299712 0.0156965682 0.2380082767 0.1206411490 -0.2275510500 -0.0777975327 -0.1161745333 -0.0394530595 -0.0731378979 -0.1228678427 -0.0590892644 0.0771848466 0.0731569051 -0.0241107004 -0.0450579451 0.0601455056 0.1672305956 0.0726253871 0.0542848143 -0.0514647811 0.0145561852 0.0792218455 0.1183313056 0.0174353735 -0.0912556300 -0.1541204809 0.2072336214 -0.0924249609 -0.5025456797 0.0022536768 -0.1491667548 -0.1929248600 0.0310800013 0.0233054385 0.0149768993 -0.0258448315 -0.0010199668 0.0084993480 -0.0261042014 0.0162377215 -0.0358932124 0.0182854722 0.0112140887 0.0082115016 0.0164055982 0.0129154484 0.0062745289 0.0045910142 -0.0015605670 -0.0204360994 -0.0119857156 -0.0066909490 0.0058338153 0.0036335644 -0.0025689558 -0.0211439328 -0.0133652380 -0.0078642064 0.0051165990 -0.0331552167 -0.0079060695 0.0668555139 -0.0077134455 -0.0027528959 0.0183143689 -0.0312386918 -0.0072104995 0.0595709598 -0.0067282842 0.0001839468 0.0233617480 -0.0513649599 -0.0307057353 0.0208251010 -0.0000895180 -0.0096088051 -0.0452087784 -0.3282183754 -0.4118218888 0.2008680617 0.0009602405 0.0000852404 0.0007680664 -0.0064980391 -0.0017056166 0.0035116264 0.0177563592 0.0128650252 0.0028238065 -0.0030940682 -0.0062707516 -0.0046623420 -0.0001019692 -0.0003951649 -0.0002206088 0.0001541294 0.0003080084 0.0000404106 0.0002908562 0.0001876102 0.0000469214 -0.0000802291 0.0002468136 0.0001445681 -0.0089620422 -0.0029575667 0.0029169381 -0.0050771572 0.0015687550 0.0049809921 0.0008689291 -0.0001713555 0.0011189403 -0.0013869622 0.0005485281 -0.0026900631 -0.0006535164 0.0011746694 0.0012964966 -0.0018230805 -0.0001026115 -0.0033646863 -0.0015723613 0.0033226382 0.0009796253 0.0011617922 -0.0000882589 0.0034199996 -0.0027638349 0.0004880148 0.0019857842 0.0010967959 0.0018374028 -0.0024133472 0.0031126163 0.0007215261 0.0004837329 0.0340392564 0.0089787672 -0.0265152242 0.0333503021 -0.0018212903 -0.0163511903 0.0211246021 -0.0330583945 -0.0421043762 -0.0001090739 -0.0003013205 -0.0002132599 0.0001345137 0.0001127101 0.0001554174 -0.0000534974 -0.0003464919 0.0002138429 -0.0008036920 -0.0001933167 -0.0000397373 0.0011094734 0.0006321021 0.0002726969 -0.0006772844 -0.0001558212 0.0002660562 -0.0009869009 0.0009583436 -0.0009670581 0.0015713775 0.0012688194 -0.0029855904 0.0023130438 0.0004524403 -0.0013401945 -0.0008659015 -0.0004614007 -0.0002267094 -0.0006126095 -0.0002985705 0.0002187135 -0.0007277477 0.0007852272 0.0004437851 -0.0008392980 -0.0001340489 -0.0014033624 0.0016428731 -0.0006782204 0.0009148592 -0.0009484578 0.0009177537 0.0005011828 -0.0005040570 -0.0002571014 -0.0009086393 0.0033768146 -0.0030987634 -0.0011693419 0.0029663743 -0.0013830011 0.0015824362 -0.0018124444 0.0009694242 -0.0002686817 0.0025587296 -0.0021442007 -0.0009240090 0.0034490668 0.0001007793 0.0006639509 -0.0007853829 -0.0000219008 0.0016103585 -0.0009200224 -0.0002753761 -0.0003365277 0.0005099364 -0.0000852364 0.0007991804 0.0006860851 -0.0005597179 -0.0007261030 0.0005243486 0.0000807818 -0.0002809705 -0.0002094568 0.0000238698 0.0001202593 -0.0003373360 0.0002185489 0.0002084639 -0.0001444345 -0.0003194859 0.0000550253 0.0011589457 -0.0001137959 -0.0006683126 0.0008776091 0.0009158041 -0.0004292982 -0.0003668203 0.0001615455 0.0002546929 0.0003274520 -0.0000018037 -0.0002002265 0.0011493516 -0.0001977211 -0.0007923581 0.0003787455 0.0000736116 -0.0002123064 -0.0022523046 0.0007879306 -0.0013579028 0.0020899130 -0.0007023262 0.0010887219 0.0014100178 -0.0014724630 0.0009701924 0.0012981236 0.0024003518 0.0005607108 -0.0057445863 -0.0010926379 -0.0036803895 -0.0050292909 -0.0072738889 -0.0022983921 0.0013547011 -0.0007609327 0.0007943696 -0.0017559316 0.0000141564 -0.0009874338 -0.0029522264 -0.0005858145 -0.0015876625 -0.0011124153 -0.0026682301 -0.0004787933 -0.0001595576 0.0021626268 -0.0013760095 0.0221293849 -0.0242056524 0.0078332553 0.0160099000 0.0118959043 0.0020258981 -0.0195053785 -0.0204510017 -0.0027668018 0.0063137042 0.0012079974 -0.0000410727 0.0039399614 0.0017201619 0.0004316175 -0.0313858742 0.0190889729 0.0101961118 -0.0281644218 -0.0165393588 -0.0220338805 0.0006264191 0.0001658157 -0.0002766531 0.0011796574 -0.0001517848 -0.0003990014 -0.0006237250 0.0002198184 0.0002889684 -0.0005140459 -0.0003791741 0.0001732537 0.0010071652 -0.0007331585 -0.0003669648 0.0008865683 0.0001987240 0.0006325811 0.0002720969 0.0004892473 0.0000743938 -0.0006856571 0.0000476723 -0.0003588970 -0.0002982981 0.0002279703 -0.0001030487 0.0011215627 -0.0001529658 0.0006443505 -0.0007075915 -0.0006375715 -0.0005918842 -0.0005409719 0.0001448264 -0.0003301987 0.0000299976 0.0035419330 0.0030648884 0.0028258599 -0.0030860795 -0.0028843901 -0.0019997982 -0.0036481835 -0.0032039563 -0.1603397229 0.1344137054 0.2428005141 -0.0224397377 -0.0126740704 0.0184959365 -0.0008083633 0.0035166615 0.0064652215 -0.0005463283 0.0027371883 -0.0099000797 0.0049858994 0.0093114454 0.0062590488 0.0038171031 -0.0166605095 -0.0306446248 0.0055054931 0.0220340814 0.0228551069 -0.0314368515 -0.0331327677 0.0004388930 -0.0171719159 -0.0290945152 -0.0201717134 -0.0224329568 -0.0028511460 0.0371613456 -0.0230843988 -0.0339954033 -0.0127820522 0.0013529185 -0.0121180971 -0.0166953915 0.0214932697 -0.0162243851 -0.0542194824 0.0056017854 -0.0164396324 -0.0063037331 0.0010873105 0.0481325805 0.1641219242 -0.0025865385 0.0242028929 0.1073256943 0.0839032389 0.0388164932 -0.0787090867 -0.0860304744 -0.0728891213 -0.0454319114 0.0890345872 0.0295635935 -0.1329292374 -0.0909482323 -0.0882918233 -0.0987580484 -0.1166337345 0.0261011754 0.4083201107 0.1083327988 0.1593170520 0.3441740073 -0.1266440606 0.0128181339 0.4029493446 0.1594431211 0.1990392168 0.3719870521 0.0102383654 0.0382106335 0.1296666629 0.0096237196 0.0106916324 0.0048899050 0.0788665408 0.0933070268 -0.0427863007 0.0010548350 -0.0006643154 0.0004049999 -0.0075122204 0.0034235688 0.0050280643 0.0106282791 0.0048872656 -0.0042617867 -0.0012743695 -0.0030586733 -0.0015432482 0.0001303942 0.0002188249 -0.0000649686 -0.0000700344 -0.0001153796 -0.0000708200 0.0003088996 0.0002717560 -0.0005698354 -0.0000894587 -0.0000471995 -0.0001700599 -0.0039578821 -0.0013435488 0.0019476820 -0.0028629860 0.0016068132 0.0030884062 0.0014376046 0.0011892683 0.0010682620 0.0000769368 -0.0000105148 -0.0012596517 -0.0008770181 0.0011431261 0.0010767879 -0.0034150254 -0.0076339129 0.0037331207 0.0032666428 0.0011893111 -0.0002776346 -0.0045923498 0.0016243474 0.0051600724 -0.0000263378 -0.0004772819 0.0020286455 0.0001579486 -0.0000157461 -0.0005861562 0.0006669942 0.0020427563 0.0010677696 0.0122226154 0.0020100217 -0.0245740914 0.0172384251 -0.0138951297 -0.0089911010 0.0083543175 -0.0139384371 -0.0137742586 -0.0002617370 -0.0001450354 0.0001927044 0.0005643606 0.0002216467 -0.0001158254 -0.0004683304 -0.0001145239 0.0002028823 -0.0002289601 -0.0002455822 0.0000413823 0.0010322166 0.0004346031 -0.0004176812 -0.0009283036 -0.0002240118 0.0005066539 -0.0012844683 -0.0019030536 -0.0000805672 -0.0000010207 0.0004937348 -0.0008384500 0.0001474508 0.0000455673 0.0000142395 -0.0000317565 -0.0016710251 -0.0001417356 0.0009327700 -0.0003526338 -0.0011100435 -0.0003404433 0.0005631995 0.0005558650 -0.0008662103 0.0001005344 -0.0010228329 0.0009949640 -0.0005494052 0.0003053167 -0.0007684918 0.0008412665 0.0005888822 -0.0004302869 -0.0000765193 -0.0008204467 0.0023859119 -0.0021555927 -0.0004031936 0.0027109235 -0.0010009617 0.0017919279 0.0001166061 -0.0000924965 -0.0001030930 0.0024193324 -0.0018678698 -0.0007173009 0.0026426673 -0.0010526837 0.0015273085 -0.0000286556 0.0000480803 -0.0001280855 -0.0000064630 0.0000003747 0.0000308815 -0.0000820964 0.0000106293 -0.0001294505 -0.0001270653 0.0001177752 0.0001711171 0.0001465772 0.0001211952 -0.0000526189 -0.0003614448 -0.0000044476 0.0002226344 0.0003649633 -0.0001554164 -0.0002253942 -0.0001171122 0.0003537741 0.0000990311 -0.0009070711 0.0001510771 0.0005366061 -0.0005877313 -0.0001512411 0.0003380007 0.0004039621 0.0001364522 -0.0002376215 -0.0000375028 -0.0005302851 -0.0000254721 -0.0010970055 0.0005537354 0.0008840210 -0.0005258959 0.0012793188 0.0004224197 -0.0008802040 0.0000836911 -0.0005239914 0.0006888145 -0.0000913329 0.0003638204 0.0001452758 -0.0004473512 0.0001224700 0.0005505872 0.0006904320 0.0002624350 -0.0011531335 -0.0004191273 -0.0007857832 -0.0012306259 -0.0020723199 -0.0005061386 0.0002481152 -0.0002506386 0.0001513565 -0.0004924113 0.0000875893 -0.0002856244 -0.0004939949 -0.0002586159 -0.0002468554 -0.0001357120 -0.0011444181 0.0000156190 0.0014945542 -0.0003924269 -0.0010319079 0.0027027052 -0.0021425790 -0.0011061981 -0.0030860805 0.0045359052 0.0070133353 -0.0051372671 -0.0101368229 0.0020848110 0.0022696381 -0.0019360570 0.0009551003 0.0110639131 0.0089253245 0.0085878687 -0.0202668036 0.0289677084 -0.0041311751 -0.0132199298 -0.0075320419 -0.0180213732 -0.0079358473 -0.0218353951 -0.0008833514 0.0046449379 0.0073128408 -0.0038237974 -0.0057870500 0.0087598778 0.0042644956 0.0049641296 0.0033293759 -0.0082865447 -0.0041828731 0.0100603972 0.0042984506 -0.0434519776 -0.0036924003 -0.0212344850 0.0560808647 -0.0295121377 0.0298395018 -0.0063032698 0.0086001528 -0.0056220440 -0.0712008586 0.0632808114 -0.0229320513 -0.0175529380 0.0142776677 0.0053684848 0.0075586992 0.0056651329 0.0043841748 0.0011446826 -0.0020801693 -0.0006119895 0.0028833296 -0.0000090454 -0.0010808998 -0.0018416928 0.0023163206 0.0016012663 -0.0018146180 -0.0016013783 -0.0006916298 -0.0043495673 0.0035929149 0.0036004080 -0.0025746825 -0.0021409650 0.0012432812 0.0003528576 0.0002108320 -0.0003113984 0.0011968126 -0.0002688776 -0.0022233937 0.0004766331 0.0012738291 0.0011223825 -0.0002893538 -0.0011087149 -0.0011675882 0.0004590413 0.0016733770 0.0016811913 -0.0024579283 -0.0025369398 -0.0001736426 -0.0020256177 -0.0035619247 -0.0021231898 -0.0010725471 -0.0009424199 0.0010253808 -0.0030291799 -0.0043452215 -0.0026655981 -0.0001957178 0.0000943977 0.0003463430 0.0004510151 0.0003045070 0.0011490210 0.0014654678 0.0002887185 -0.0012561781 -0.0001523723 -0.0006450889 -0.0022083798 -0.0002462882 -0.0004787941 -0.0012293565 -0.0010155238 -0.0005085778 0.0009655814 0.0011206316 0.0009760429 0.0004863222 -0.0009813003 -0.0002723298 0.0015761039 0.0012026800 0.0011441946 0.0012353368 0.0013148085 -0.0002563429 -0.0048828517 -0.0010170843 -0.0020687553 -0.0039731871 0.0019045432 -0.0002101238 -0.0052012605 -0.0018086767 -0.0023109310 -0.0044579142 0.0003357438 -0.0001463841 -0.0016494022 0.0005326558 0.0006014728 0.0008635518 0.0077891925 0.0090999303 -0.0061354471 0.1530204675 -0.1082223006 0.0432802614 0.0008420269 -0.0001024946 -0.0012364541 -0.0011638827 -0.0001042588 0.0006981208 0.0001496436 0.0002784396 0.0000958220 0.0000019455 -0.0001170499 0.0000120275 0.0002540124 0.0002091204 0.0000920125 0.0000284694 -0.0003209082 -0.0000379306 -0.0000009134 0.0000175187 -0.0000128586 0.0003183896 0.0000605456 -0.0001673214 0.0002803079 -0.0000725612 -0.0002473033 -0.0015864400 -0.0029502972 -0.0003708567 -0.0023533427 0.0003111678 0.0007424286 0.0008078633 0.0005604156 -0.0015100629 -0.0001983879 0.0008376553 -0.0018115287 -0.0011163086 0.0026521097 0.0008835916 0.0004777403 -0.0001714145 0.0020784755 -0.0002532809 0.0000894023 -0.0000997062 -0.0000161383 0.0002211770 -0.0000004833 0.0001705697 -0.0002053015 -0.0001133090 -0.0012575786 -0.0002920513 0.0015918513 -0.0014300735 0.0006437310 0.0007541986 -0.0006289629 0.0011942431 0.0012205494 0.0330716205 0.0135396834 -0.0087251028 -0.0123331958 -0.0142045147 -0.0144863518 -0.0224418519 0.0042993195 0.0252975324 0.0312768548 0.0107788958 -0.0040483540 -0.0241375807 -0.0197766865 -0.0161162344 -0.0143190306 0.0054999619 0.0232317119 0.0724364897 0.0351334619 0.0015452352 0.0753230756 0.0003217493 -0.0548835388 -0.0017529634 -0.0005241192 0.0015478273 0.0767575034 0.0383664035 0.0067848052 0.0811611183 0.0090339108 -0.0578740620 -0.0435409909 0.0759254230 0.0791213631 -0.1172120061 0.0178535404 -0.1295032432 0.1373293085 -0.0824635217 0.0280480796 -0.1017277395 0.1177465486 0.0824446886 -0.0598878804 -0.0077042812 -0.1088164986 0.3164063765 -0.2643508459 -0.0495384614 0.3419936233 -0.1243952711 0.2363225790 -0.0015164077 0.0002404831 -0.0019758459 0.3194041369 -0.2797731684 -0.0847668416 0.3469497950 -0.1577633202 0.2164743726 -0.0004804456 0.0001023220 0.0012435051 -0.0022202501 -0.0008303514 -0.0020019000 -0.0068391517 0.0008656488 -0.0129645721 -0.0086673203 0.0084515153 0.0114972077 -0.0018235491 -0.0034235140 0.0007954743 -0.0138688714 0.0067378056 0.0096199949 0.0090953237 -0.0047259351 -0.0056338668 -0.0003520971 0.0145281419 0.0015406928 -0.0303235371 0.0049277351 0.0177689248 -0.0187874399 -0.0053950186 0.0103930415 0.0111492457 0.0064019950 -0.0064735169 0.0001567426 -0.0216957692 -0.0020322268 -0.0368523593 0.0200349543 0.0268930934 -0.0173346338 0.0436821700 0.0141444209 -0.0319622522 -0.0006381410 -0.0182970186 0.0530783152 -0.0002352551 0.0278440402 -0.0204526157 -0.0075783339 -0.0116776978 0.0257887233 -0.0045471841 0.0153624070 0.0314774538 -0.0165048393 0.0208352104 -0.0002125089 -0.0537322644 0.0045180621 -0.0155291575 -0.0246508915 -0.0070373014 -0.0207582994 0.0453459239 -0.0146732383 0.0538151090 -0.0384006295 0.0309827995 0.0411019603 -0.1252956651 0.0312218257 0.0000042667 0.0000366119 0.0000891042 -0.0005365994 -0.0001645375 -0.0016210842 -0.0013368381 0.0007787857 0.0015521350 0.0007025796 -0.0008247099 0.0021624574 -0.0004459235 0.0000075170 0.0000084365 -0.0021215725 -0.0000497744 0.0004746784 0.0036096515 -0.0019972983 -0.0010285478 0.0019882042 0.0003044494 0.0035869095 0.0828360490 0.0185676195 -0.0297124599 0.0238770224 0.0167667170 0.0060605937 0.0082736908 0.0144381195 -0.0046242298 -0.0567171916 -0.0186987804 0.0240785648 0.0420958918 -0.0021307340 -0.0190658940 -0.0077594631 0.0134311695 -0.0024862770 0.0128605683 -0.0061748755 0.0012933516 0.0047842288 0.0128643702 0.0019232378 -0.0249048558 -0.0080052719 -0.0111866880 -0.0033256155 0.0164993410 0.0015531570 0.0007625648 0.0000716925 0.0006785928 -0.0048429183 0.0061769284 0.0034048751 -0.0016009951 0.0007148415 -0.0012172949 0.0009246203 -0.0009550342 -0.0001507553 0.0012906840 0.0014433157 0.0012689240 0.0009160319 -0.0029381393 0.0005334397 0.0026616933 0.0025413775 -0.0006992767 -0.0006121640 -0.0001569157 0.0009021600 -0.0010338167 0.0010090267 0.0027928298 -0.0007066888 -0.0014316319 -0.0010826751 0.0009940403 0.0010055825 -0.0000192373 -0.0011585691 -0.0022398182 -0.0014935563 0.0027419485 0.0024654408 -0.0006932476 0.0024505235 0.0045108771 0.0031304990 -0.0000523005 0.0021123256 0.0018376915 0.0053038345 0.0046152741 0.0058437547 0.0008256590 -0.0005815132 -0.0012018281 -0.0008224959 -0.0000476193 0.0008335033 0.0004724903 -0.0004800190 -0.0025151224 0.0005660505 0.0002782935 -0.0000495728 0.0005081787 0.0003554111 -0.0002492294 -0.0000776983 0.0001313344 0.0001339745 -0.0002507137 -0.0003263206 -0.0002493307 -0.0003037038 -0.0001170031 0.0005379485 -0.0002252526 -0.0001922342 -0.0001527191 0.0000086665 -0.0000183853 0.0002541281 -0.0004550741 -0.0004251968 -0.0008623598 -0.0001238318 -0.0000659648 -0.0000743960 -0.0000327659 -0.0000670961 0.0001897488 -0.0008165502 -0.0005432130 -0.0000452950 -0.0008214183 -0.0008463990 -0.0003445379 -0.0019184847 -0.0044658720 0.0024780709 0.0257378991 -0.0149509353 0.0088684987 0.0008960527 -0.0002663554 -0.0015087814 -0.0009678900 0.0006244665 0.0014582013 0.0000236723 -0.0001083362 -0.0002364125 -0.0000626838 -0.0001179277 -0.0000232052 0.0000929635 0.0001034504 0.0000074421 0.0001106440 -0.0000531214 0.0001194369 0.0000361839 0.0000507623 0.0000147184 0.0001911725 -0.0000450705 -0.0002023597 0.0001928645 -0.0000061362 -0.0001184750 -0.0004034142 -0.0008296178 -0.0000878366 -0.0006885707 0.0001328783 0.0002058503 0.0001796682 0.0000073071 -0.0002073811 -0.0004463692 0.0005522062 -0.0018855324 -0.0011575236 0.0010155721 0.0004115709 0.0003871533 -0.0000799166 0.0003920769 -0.0001722451 0.0000785105 0.0000692968 0.0000761482 -0.0000987814 -0.0001013051 0.0000094158 -0.0001468195 -0.0000919353 -0.0007277814 -0.0001006238 0.0011262524 -0.0006927021 0.0006279692 0.0004472251 -0.0001742393 0.0005784396 0.0001758901 -0.1688237190 -0.0555033218 0.0529590421 0.0673741983 0.0690843893 0.0670880269 0.1056923534 -0.0254067448 -0.1274131415 -0.1496062933 -0.0424323506 0.0364956948 0.1231873109 0.0927871976 0.0681272097 0.0551786380 -0.0313490438 -0.1066012064 -0.3662194955 -0.1755682581 -0.0198385243 -0.3597250817 -0.0062680268 0.2510505239 0.0097167576 0.0021560757 -0.0047139529 -0.3691762986 -0.1910929763 -0.0466419439 -0.3668332343 -0.0441411369 0.2442241216 -0.0085067142 0.0124761081 0.0118022104 -0.0178596681 0.0016536750 -0.0214613465 0.0216212490 -0.0109542658 0.0084335639 -0.0171063658 0.0180631917 0.0106871570 -0.0067847335 -0.0029877589 -0.0158865341 0.0522136260 -0.0427830830 -0.0106783864 0.0522997501 -0.0199386402 0.0336751014 -0.0006416555 0.0003197723 0.0003638342 0.0488524722 -0.0441390230 -0.0161202930 0.0489709373 -0.0224748410 0.0267241058 0.0033283232 -0.0003317226 -0.0083819670 0.0082317369 0.0033005966 0.0077237814 -0.0012763492 0.0001847467 -0.0024526743 -0.0007929472 0.0008481454 0.0011792867 -0.0572936616 0.0125998121 0.0316145278 0.0140339340 -0.0005634998 -0.0074774951 0.0161246063 -0.0349855288 -0.0124752959 0.0356828688 0.0536580763 -0.0153393158 -0.0975833584 -0.0149611740 0.0524356032 -0.1007213352 -0.1147783120 0.0467113036 0.0294142493 -0.0079396581 -0.0187996488 -0.0262066022 -0.0192705583 0.0138427167 -0.0749689869 0.0157225297 0.0496737795 -0.0356832030 -0.0071078176 0.0206054260 0.0096244235 0.0032444657 0.0060729176 0.0230418980 -0.0073449242 0.0124243810 -0.0198205969 0.0099627042 -0.0130526084 0.0006670376 -0.0285977110 0.0026615252 0.0697134509 0.0019938705 0.0463197252 0.0401502053 0.0262703736 0.0210999114 -0.0198671445 -0.0109391439 -0.0103694625 -0.0011636461 0.0347422377 -0.0029956149 0.0616120272 -0.0214426162 0.0351333697 0.0365768270 -0.0613175247 0.0247681369 0.0000455782 0.0000108091 0.0002075943 -0.0006790875 0.0001907710 -0.0013254515 -0.0009014930 0.0003419202 0.0010109467 0.0007874928 -0.0001040966 0.0014234119 -0.0000731615 -0.0001550740 0.0003036320 0.0003903207 0.0002142408 0.0004836181 -0.0008569047 0.0019012997 -0.0004943670 -0.0016245406 -0.0006780070 -0.0015753944 -0.0031493286 -0.0006369845 0.0012639170 -0.0038248470 0.0002676255 0.0012607358 0.0020111147 -0.0008469062 -0.0009692349 0.0019642398 0.0036738628 -0.0003203168 -0.0034204645 0.0019930363 0.0016443026 -0.0041068064 0.0037503054 -0.0022882550 -0.0014755875 -0.0064599774 -0.0005637595 0.0026212227 0.0023262103 0.0012444665 -0.0039827179 -0.0031866117 -0.0020401786 -0.0019797200 0.0033083037 -0.0004377574 0.0027540661 0.0012650776 0.0007962369 0.0021318487 -0.0015317309 0.0004668783 -0.0019727668 -0.0044261585 -0.0036928686 -0.0014511787 0.0035199629 0.0025692292 0.0051811693 0.0081158378 0.0085677508 0.1273447471 -0.1116390916 -0.2002027672 0.2419384905 0.2270817617 -0.0765337359 -0.0786922999 -0.0336437963 0.0857516083 -0.0479623089 0.0596773948 0.1525018471 -0.0340656777 -0.1079902206 -0.1021498527 0.0743079752 0.0812438640 -0.0100483687 -0.0712425031 -0.1582099689 -0.1022974664 0.1794378627 0.1944447258 -0.0076200206 0.1959267596 0.3450744018 0.2024708321 0.0415368982 0.1310163775 0.1152767735 0.1780950369 0.4165513083 0.2526438506 0.0141606420 -0.0090505218 -0.0263827356 -0.0080160671 -0.0194240092 -0.0289090594 -0.0666362301 0.0304343926 0.0477283883 -0.0005984791 0.0112443151 0.0369018084 0.0021649056 0.0067212454 0.0214177532 0.0140572707 0.0075251842 -0.0084566825 -0.0138898718 -0.0107109106 -0.0027154054 0.0156205743 0.0034391927 -0.0297630840 -0.0179998514 -0.0188267169 -0.0246681117 -0.0155472571 0.0076602410 0.0617338181 0.0155508747 0.0313097040 0.0643630956 -0.0261020328 0.0000998909 0.0727196518 0.0311118977 0.0375324541 0.0671749323 -0.0012588151 0.0060988931 0.0267606192 -0.0605853341 -0.0652136234 -0.0115097753 -0.1424384464 -0.2140518079 0.0846982416 0.0018616402 -0.0009048119 0.0006870593 0.0052987244 -0.0008453919 -0.0108762164 -0.0043441651 0.0093320626 0.0136871402 -0.0011115573 -0.0044718733 -0.0041112890 -0.0000006823 -0.0004391941 -0.0002959103 0.0002444102 0.0004891748 -0.0001122005 0.0002053680 0.0000317478 0.0000178230 -0.0000488139 0.0003663116 0.0001324691 -0.0001066095 -0.0010674783 -0.0011323251 0.0009917551 -0.0000006247 -0.0007241332 0.0003051701 -0.0031623134 0.0017686506 -0.0030110249 0.0006487610 -0.0006995708 -0.0004040944 0.0010962133 0.0010174362 -0.0015257809 0.0004701095 -0.0027271042 -0.0010800385 0.0038687750 0.0010978028 0.0018609540 -0.0004404184 0.0034131780 -0.0005388747 0.0002398024 0.0011375919 0.0002674036 -0.0006520419 -0.0005461329 0.0002917381 0.0000497738 -0.0000383615 0.0003571268 0.0014667781 0.0094587697 -0.0041254623 0.0087619842 0.0035846206 0.0021454192 -0.0006132284 -0.0030188949 0.0031639785 0.0011336782 -0.0013468823 -0.0014621875 -0.0014811026 -0.0012316296 -0.0019547883 0.0009780686 0.0027464482 0.0030488636 0.0010955028 -0.0002693202 -0.0059063107 -0.0034898987 -0.0015066742 0.0019444865 0.0012621820 0.0008114814 0.0130830525 0.0082257176 0.0013862299 0.0053560752 -0.0013378628 -0.0011851151 0.0021787505 0.0005856321 -0.0001565557 0.0101215186 0.0052809960 0.0028153084 0.0061367608 0.0022497808 -0.0027900450 -0.0009585596 0.0010424506 0.0007202671 -0.0008081649 -0.0001439765 -0.0013552903 0.0011007963 -0.0002583008 0.0010393967 -0.0010810817 0.0010038814 0.0003102779 -0.0000020383 -0.0003882812 -0.0008166392 0.0036400241 -0.0030071119 -0.0011111631 0.0026817031 -0.0013807305 0.0014225746 0.0005675538 -0.0003286207 0.0004025919 0.0028411957 -0.0035425354 -0.0013216249 0.0014531994 -0.0017586739 0.0008424198 -0.0006593404 0.0000652745 0.0012668456 -0.0012873374 -0.0007109330 -0.0012394855 -0.0003556680 0.0001030781 -0.0006395513 -0.0001984145 0.0002074664 0.0001921643 0.0000005904 -0.0009814188 -0.0001395897 0.0014983674 -0.0002895690 -0.0010355227 -0.0009203868 0.0012079342 0.0006521148 -0.0004711467 -0.0023711020 0.0000426874 0.0035095593 0.0003237609 -0.0019063895 0.0033298028 0.0021295409 -0.0017270511 -0.0011536382 -0.0008393270 0.0006220158 0.0000340103 0.0028227529 0.0002447282 0.0034096003 -0.0021562919 -0.0026983947 0.0020112812 -0.0045838528 -0.0016298022 0.0059501291 0.0003929860 0.0035665706 0.0026794951 -0.0002831730 0.0014149139 -0.0032873315 0.0037262541 -0.0022883080 -0.0025603131 -0.0084769565 -0.0008189789 0.0148421019 0.0026107282 0.0095727086 0.0112851443 0.0119576706 0.0054489352 -0.0043437744 -0.0020101687 -0.0023015239 0.0010824329 0.0072299670 0.0001290430 0.0120133046 -0.0039416409 0.0068224114 0.0075704570 -0.0084824831 0.0048270633 -0.0004082152 -0.0018616666 0.0047976460 -0.0075539129 0.0090743582 0.0034298844 0.0141631738 -0.0086932995 -0.0118532721 0.0075816329 0.0249775206 -0.0166869152 0.0016636547 -0.0026589525 0.0004477937 -0.0070384328 0.0120660111 0.0163427711 -0.0081129536 0.0210290950 -0.0078676396 -0.0162915342 -0.0145852574 0.0010424032 -0.0223310062 -0.1506940983 -0.0195535913 -0.0712876790 0.0854356646 0.0429253825 0.0247484513 0.0579445567 -0.0033761503 0.0498805888 -0.0792330378 -0.0291390777 0.0288686916 0.1298350709 0.0017872070 0.0081975187 0.1301797060 0.0041896010 -0.0656282029 -0.0574979248 -0.0257666253 -0.0058087492 0.0626180908 -0.0012522941 -0.0290617690 -0.1421283190 -0.0269214512 0.0904485731 0.0579518098 0.0449065426 -0.0014185497 -0.0076533329 -0.0033326941 -0.0005723868 -0.0091076871 -0.0034536756 -0.0002234964 -0.0033039245 0.0040684857 0.0003157506 0.0005794556 -0.0013409935 -0.0006163826 -0.0000657633 -0.0018275903 0.0009354634 0.0005933817 -0.0013343539 -0.0064715931 -0.0063590134 0.0015337851 0.0023951206 0.0008752893 -0.0028609362 0.0010073046 -0.0019368761 -0.0038512810 0.0009267709 0.0029164439 0.0027656868 -0.0025161689 -0.0018631581 0.0015650354 0.0022358847 0.0041092282 0.0021692612 -0.0043088471 -0.0047012628 0.0004892279 -0.0054094389 -0.0094745426 -0.0056865118 -0.0002054319 -0.0041180398 -0.0054249232 -0.0052338178 -0.0110200086 -0.0080614522 -0.0004129549 0.0006089207 0.0013447439 -0.0000530234 0.0004203469 -0.0000476869 -0.0000276249 -0.0001342073 0.0009035023 -0.0001832744 -0.0003149536 -0.0003297274 -0.0001196503 -0.0001291290 -0.0001483595 -0.0000718365 -0.0000482126 0.0001152488 0.0001716362 0.0002101251 0.0000104326 -0.0000585169 0.0000399698 0.0001815457 0.0001346569 0.0001515675 0.0001316048 0.0001106268 0.0000336712 -0.0003675818 0.0008169785 -0.0002606932 0.0004593183 0.0005070447 -0.0000902222 -0.0007482690 -0.0001315828 -0.0003832227 -0.0005010630 0.0002788964 0.0001124014 -0.0002485724 0.0017921358 0.0018734169 -0.0000606361 -0.0037873780 -0.0008317536 0.0014690587 -0.0216994150 0.0340552373 0.0012341947 -0.0011851297 0.0002715998 0.0019706624 0.0012249915 -0.0007698261 -0.0017406980 -0.0000417313 0.0001352707 0.0002382522 0.0000928867 0.0001424536 0.0000952343 -0.0000608652 0.0000573509 -0.0000857048 -0.0002635883 0.0000330353 0.0001006809 -0.0000384079 -0.0000426785 -0.0000275442 -0.0001914106 0.0000606240 0.0002141035 -0.0002588741 0.0000374484 0.0002201649 -0.0005637405 -0.0007242666 -0.0002766296 0.0004030939 -0.0000876898 0.0014247868 0.0004121040 -0.0007184865 -0.0006331983 0.0014637424 0.0013180207 0.0012475394 0.0000907829 -0.0021085475 -0.0006157780 0.0009889331 -0.0003502022 -0.0028485847 0.0002098312 -0.0000334360 -0.0002685706 -0.0001487935 0.0001298304 0.0002739601 -0.0000500636 -0.0000810913 -0.0000599236 0.0006813818 0.0000281558 -0.0017693124 0.0012500704 -0.0011274210 -0.0007629051 0.0001146961 -0.0005798621 -0.0004288657 0.0428294610 0.0321740991 -0.0045186054 0.0042610918 -0.0094649261 -0.0174942792 -0.0320183147 -0.0041789788 0.0188571493 0.0368103310 0.0249557087 0.0183549564 -0.0266173679 -0.0271517479 -0.0265322491 -0.0233815820 0.0016302457 0.0281354476 0.0448258145 0.0186549572 -0.0161479353 0.0732513403 -0.0077347658 -0.0729873275 -0.0024501932 -0.0015506444 0.0060709956 0.0797813512 0.0346581176 -0.0051021115 0.1011666762 0.0125321336 -0.0866658041 -0.0087144892 -0.0018466323 -0.0125626937 0.0217330792 -0.0119509365 0.0092298111 -0.0190463172 0.0238972307 0.0209083935 0.0122360894 -0.0213798808 -0.0225759876 0.0173672766 -0.0065668647 0.0192505324 -0.0196322455 0.0163245681 -0.0139930580 -0.0464417718 0.0099437190 -0.0502173059 0.0011125377 -0.0001597893 0.0050770028 -0.0463090019 0.0352574413 -0.0022884693 -0.0661302785 0.0325666156 -0.0586643549 0.0016334499 0.0003854141 -0.0033488178 -0.0043688535 -0.0013975846 -0.0037796902 -0.0016419884 0.0004344669 -0.0028618534 0.0031094263 -0.0027729809 -0.0038043137 -0.0791137465 -0.0143302285 0.0394285704 -0.1022639974 0.0623084825 0.0665192385 0.0636086983 -0.0573264618 -0.0416402986 0.0258407022 0.1259416211 -0.0028612198 -0.2383416848 0.0102380288 0.1333395168 -0.1719141451 -0.1015134482 0.0891409889 0.0796644108 0.0382608847 -0.0455069099 -0.0084149085 -0.1498445153 -0.0084059805 -0.2403975260 0.1292839611 0.1718615098 -0.1187749960 0.2479375999 0.0902787786 0.1116600925 0.0244035744 0.0631564249 0.0731732206 -0.0402633736 0.0386256414 -0.0658129085 0.0609921106 -0.0448880754 -0.0361274386 -0.1416727444 -0.0097863444 0.2765901408 0.0384988537 0.1798164825 0.1901211923 0.1885102414 0.0927066674 -0.0792855760 -0.0328420682 -0.0421280848 0.0146136455 0.1266735463 -0.0002038454 0.2310024469 -0.0688823038 0.1300648894 0.1315371127 -0.1565434255 0.0846074049 -0.0000054497 0.0000362905 -0.0003000796 0.0008187752 -0.0001129952 0.0016293234 0.0008244011 -0.0006246427 -0.0013158461 -0.0010584100 -0.0000057234 -0.0017576006 0.0003060540 0.0002229827 -0.0002163822 0.0009848250 -0.0008827720 -0.0013911291 -0.0016625673 -0.0010947608 0.0015760497 0.0003878916 0.0008717998 -0.0014005996 0.0176434495 -0.1130962147 -0.0282428079 -0.0272656300 0.0618799392 0.0230921911 0.0003070201 0.0484078452 0.0061187287 0.0172408631 -0.1475092803 -0.0353939294 0.0296176779 0.1076713020 -0.0022564263 -0.0021930809 -0.1117126331 -0.0001311798 0.0587884609 0.1352780822 0.0350665311 -0.0171720969 -0.0471716974 -0.0087029856 0.0580934438 0.0986240867 0.0344948543 -0.0412721065 -0.0520922570 -0.0248068157 0.0017916307 0.0079303082 0.0010201897 -0.0003654857 -0.0090835152 -0.0010478377 0.0035326856 -0.0005831479 0.0000530100 -0.0020081022 0.0025049925 0.0015315811 -0.0020939726 -0.0019326546 -0.0015336459 0.0024190565 -0.0021077996 -0.0082103254 0.0109858644 0.0104071930 -0.0033441125 -0.0044379057 -0.0021504160 0.0044525355 -0.0011469602 0.0032452608 0.0059977625 -0.0009731190 -0.0040709215 -0.0043495513 0.0039023202 0.0033571472 -0.0018424097 -0.0035118747 -0.0070247268 -0.0037908423 0.0071608195 0.0080553972 -0.0002931183 0.0084611617 0.0145294968 0.0080482784 0.0013447061 0.0062737146 0.0069376151 0.0067177185 0.0176976363 0.0112604359 0.0012509077 -0.0006654314 -0.0014221109 -0.0006691753 -0.0005056165 0.0000620937 -0.0019914900 0.0016672496 0.0002057406 -0.0001820967 0.0000262937 0.0002400118 -0.0001022603 0.0000613025 0.0005376081 0.0000927290 0.0001957998 0.0006191935 0.0000751926 0.0001162622 -0.0000197235 0.0003140753 0.0000927906 -0.0005512682 -0.0004314513 -0.0005689074 -0.0011225737 0.0001196636 0.0004994195 0.0003983346 0.0013048529 0.0009310189 0.0026802425 0.0004477867 0.0000044585 -0.0004940127 0.0011561971 0.0010651003 0.0015919543 0.0006081658 0.0006472589 0.0004329046 -0.0026789227 -0.0029513448 0.0003621904 -0.0018338380 -0.0029548526 -0.0022258197 -0.0106307552 -0.0074914854 -0.0082917565 0.0009400398 -0.0002340045 -0.0019648790 -0.0004513745 0.0013894991 0.0019550247 -0.0001502041 -0.0004944434 -0.0005150347 0.0000138436 -0.0001127805 -0.0000469067 -0.0000160599 -0.0000189580 0.0000184882 0.0000350732 0.0002147537 -0.0003745151 -0.0000506542 0.0000829171 0.0000366259 -0.0002191708 -0.0001916833 -0.0000842266 0.0001753816 0.0000073391 -0.0001054746 0.0005573777 0.0005674354 0.0003661504 -0.0001473163 0.0000854252 -0.0011084956 -0.0003449983 0.0004377299 0.0005052138 -0.0005915701 -0.0028750669 0.0032023553 0.0023780471 -0.0004939249 -0.0004437350 -0.0015238432 0.0005948067 0.0021484777 -0.0000201665 0.0000485956 0.0000816616 0.0000113033 -0.0001463995 -0.0000726425 0.0001046212 -0.0001274391 -0.0000761656 0.0001460769 0.0001577693 0.0009652146 -0.0002971050 0.0009088123 0.0002801954 0.0004883008 -0.0002542344 -0.0006976869 -0.0010259451 0.0133105048 0.0063692819 0.0122214853 0.0032814365 -0.0016403138 -0.0037858847 -0.0068236547 -0.0080981248 0.0024011159 0.0123057994 0.0212485641 0.0026749127 -0.0049160895 -0.0103210036 -0.0117659621 -0.0042014591 0.0058772475 -0.0241942550 -0.0114918212 -0.0140680998 -0.0038413706 -0.0061652786 -0.0125736036 -0.0004916067 -0.0008456546 0.0043808610 0.0013511993 -0.0054803344 -0.0135616026 0.0212946245 0.0022361284 -0.0310158728 0.0108014034 -0.0074967632 -0.0018132613 0.0032253608 0.0051982644 0.0129032272 -0.0058717501 -0.0071418592 -0.0223506624 0.0081244619 -0.0015570180 0.0076139593 -0.0090889853 0.0080307975 -0.0019876419 -0.0285855415 0.0208183497 0.0160654719 -0.0126613625 0.0091458692 0.0043270257 -0.0008044702 0.0000158024 -0.0044291343 -0.0073949976 0.0122350415 0.0166275066 0.0086124499 -0.0050121331 0.0219865122 0.0019535036 0.0002274610 -0.0043724117 -0.0020261515 -0.0005586329 -0.0016665393 0.0024867040 -0.0004689219 0.0045985411 -0.0013998108 0.0011596085 0.0015782059 -0.0638546341 0.0195351647 0.0359159870 -0.1040784688 0.0519618037 0.0708459621 0.0496583363 -0.0716756684 -0.0354703162 0.0427802161 0.1497719000 -0.0102324613 -0.2214446037 -0.0142847285 0.1223608554 -0.1924728584 -0.1251604468 0.0984632832 0.0678126932 0.0522268319 -0.0363136440 -0.0009074947 -0.1779242451 -0.0155033670 -0.2260344594 0.1375874303 0.1633214152 -0.1225344218 0.2664983962 0.0945653764 -0.1148052788 -0.0132438982 -0.0709273149 -0.0712833398 0.0017883709 -0.0372417096 0.0514666101 -0.0742052134 0.0372987186 0.0559442103 0.1751405227 0.0187818224 -0.2761678244 -0.0546384559 -0.1771780260 -0.2107182405 -0.2176257767 -0.1027559304 0.0737091807 0.0537280388 0.0381016927 -0.0066564720 -0.1629969869 0.0070551657 -0.2163763164 0.0907881738 -0.1242858171 -0.1509256769 0.1940381666 -0.0977921047 0.0000007063 -0.0000308660 0.0004158015 -0.0005016024 -0.0001118349 -0.0013196668 -0.0000004306 0.0002572028 0.0006255385 0.0005569093 0.0004078534 0.0007318469 -0.0004143839 -0.0000937203 -0.0001098142 -0.0035786585 0.0012634446 0.0020798397 0.0047593554 -0.0015608378 -0.0019546931 0.0019371012 -0.0008768015 0.0060186959 -0.0006129418 0.0002809988 0.0006999691 -0.0024973024 0.0003351480 0.0006808153 0.0011088819 -0.0003289016 -0.0004378313 -0.0002508524 -0.0006174673 -0.0000664806 -0.0009561198 0.0013486085 0.0000854007 -0.0030746108 -0.0042819560 -0.0019064060 0.0007124173 0.0009969295 0.0003760963 0.0038381464 -0.0003187905 0.0019085794 -0.0022929239 0.0025066924 -0.0007117978 -0.0054688795 0.0008407597 -0.0024583386 0.0033419622 0.0026313386 0.0011448830 0.0013666487 -0.0001694839 0.0010331885 -0.0013984785 -0.0076176544 -0.0061517980 -0.0036149340 0.0069561802 0.0046599478 0.0061494933 0.0105335963 0.0088114526 0.3844385904 -0.3225394166 -0.5117591686 -0.0928392310 -0.0826861424 0.0387424987 0.0652018629 0.0441970742 -0.0459843843 -0.0125987563 -0.0184415838 0.0184959055 -0.0302328011 -0.0190877823 0.0229141307 -0.0381098156 -0.0101233583 0.0490854463 0.0170744200 0.0152333695 -0.0076915081 0.0322764185 0.0042998927 -0.0446117213 -0.0298973969 -0.0103502502 0.0352628062 -0.0045356999 -0.0372835652 -0.0518346537 -0.0006625242 -0.0428104460 -0.0389818641 -0.0303680050 0.0365132811 0.0657000148 -0.0027669398 -0.0087639723 -0.0924725529 -0.1222735491 0.0013366427 0.2206960181 -0.0003933477 0.0014632869 0.0315634603 -0.0151298372 -0.0068365469 0.0146374043 0.0002176818 0.0047387651 0.0141975083 -0.0079948614 -0.0062271362 -0.0046710856 0.0139376015 0.0064837727 -0.0165646309 -0.0004485573 -0.0041288664 -0.0202807460 0.0212837636 0.0002049958 -0.0157938550 0.0180449846 0.0240307869 0.0503356970 -0.0019779490 0.0023686358 0.0323391175 0.0264572239 0.0207436675 0.0212965078 0.0325558051 0.0213487786 0.0092807210 -0.0035863953 -0.0011464089 0.0013537515 -0.0661596717 -0.0632414006 0.0412685699 0.0009530898 -0.0018002711 -0.0012685137 -0.1156630235 0.0503428377 0.2037983056 0.0998804763 -0.1428297129 -0.2349933455 0.0120567882 0.0570865156 0.0593229781 0.0031570737 0.0065228093 0.0015768573 -0.0011625481 -0.0037765891 0.0004191844 -0.0022602980 -0.0034161578 -0.0005025344 -0.0010991722 -0.0050181036 -0.0011672582 -0.0140057728 0.0123563862 0.0246456839 -0.0109677525 -0.0047835781 0.0026314491 -0.0078778630 -0.0093945185 -0.0050174642 -0.0032246090 -0.0056020716 0.0281450163 0.0055922235 0.0030875820 -0.0179503008 0.0056032406 -0.0066968424 0.0190185285 0.0129652103 -0.0146411782 -0.0035307938 -0.0248496728 0.0030765423 -0.0192598027 0.0129277865 -0.0049155456 -0.0130639411 -0.0048437209 0.0061348456 0.0077858666 -0.0058930037 0.0048433526 0.0041624497 0.0081573383 -0.0131118727 -0.0783668941 0.0288855002 -0.0661427708 -0.0284832905 -0.0250982711 0.0016629845 0.0373282720 -0.0013354154 -0.0025184968 -0.0036508527 0.0008829454 0.0013335038 0.0025556773 0.0024115403 -0.0004623834 -0.0022243945 -0.0013507434 0.0002784164 0.0012706413 -0.0002352845 -0.0002201076 -0.0005430584 -0.0004995290 0.0007070186 0.0016894595 -0.0058731208 0.0017685074 -0.0004549386 -0.0045602810 0.0041411444 0.0000499819 0.0043178637 0.0023691097 0.0090053484 0.0004183459 -0.0012209923 0.0002281582 0.0006669580 0.0005115431 0.0009744289 0.0002568236 0.0004754505 0.0014186609 -0.0020716914 0.0005797302 -0.0015926665 -0.0001111053 0.0004336658 0.0007130255 -0.0016119825 0.0010603690 -0.0003246134 0.0013770455 -0.0006004603 0.0007035666 0.0029912129 -0.0014081752 0.0006127705 0.0056014949 0.0000634102 0.0028480210 0.0065130893 -0.0020076712 0.0054269573 0.0039495160 -0.0043687119 -0.0026638991 -0.0006959775 -0.0016069297 0.0000884621 0.0004635811 -0.0002063430 -0.0035748013 -0.0037563561 -0.0016458798 -0.0038497964 -0.0031616761 0.0002782210 -0.0053206393 -0.0018580057 0.0008687557 0.0010155702 -0.0005507765 0.0002064095 0.0002258110 0.0003334926 0.0001162854 -0.0001190043 -0.0006119763 -0.0002382634 0.0003612782 0.0008907564 0.0006355659 -0.0004236448 -0.0002925019 -0.0004253903 -0.0002633546 -0.0006916406 -0.0012476571 0.0001019730 -0.0000756253 -0.0001142698 0.0000779943 -0.0001331472 -0.0001232329 0.0000825275 0.0002933389 -0.0003645605 -0.0006146801 -0.0000711312 -0.0009589759 -0.0001278788 -0.0002920761 -0.0003322089 -0.0001693306 -0.0024106748 0.0006924788 -0.0013036445 0.0005917254 -0.0003709729 0.0004222901 -0.0000756742 0.0011100192 -0.0001224187 -0.0028221646 -0.0001137431 -0.0020879639 -0.0010920666 -0.0002186845 -0.0006638437 0.0003080451 0.0008969936 0.0001383423 0.0005881304 -0.0017269050 0.0004532755 -0.0011050823 0.0011650721 -0.0007888538 -0.0010773608 0.0027225002 -0.0008416788 -0.0013285358 -0.0008213060 -0.0244448859 0.0536766729 0.0037331999 0.1306087473 0.0639919186 -0.0646487701 -0.1162641864 -0.0781343834 0.0163726032 -0.1502566060 0.0150614527 0.0066002634 -0.0197104790 0.1256682049 -0.0642035731 -0.1070915925 -0.0809476020 -0.0906279860 0.0851522099 0.1025113920 0.1477167604 -0.1130396057 0.0020411543 -0.0016759316 -0.0010201322 0.0050883390 0.0002568148 -0.0017195611 -0.0031480563 0.0018537784 0.0017244107 0.0001079663 -0.0007200856 -0.0001858609 0.0006114183 -0.0003393037 -0.0001413547 0.0007862299 0.0017629248 0.0004957897 0.0004398236 -0.0003907015 0.0002009371 -0.0025784241 -0.0000917789 -0.0012400764 0.0020020937 -0.0005033231 0.0010117353 0.0036595357 -0.0010196470 0.0017030090 -0.0012885694 -0.0009404724 -0.0008368715 -0.0009143486 0.0006675309 -0.0007205971 0.0005515522 0.0030237218 0.0035278598 0.0015645294 -0.0020056870 -0.0021340893 -0.0020817176 -0.0052889920 -0.0077074583 -0.2457402514 0.2435284293 0.4050792673 0.2080870554 0.2012008944 -0.0634487344 -0.1716368907 -0.1060941805 0.1361963607 0.1008535602 0.0768811211 -0.0735261176 0.0757686136 0.0337039717 -0.0785619429 0.1112731798 0.0007729992 -0.1891484281 -0.0532628645 -0.0205411687 0.0662916125 -0.1033321131 -0.0072175301 0.1688142763 0.0869528548 0.0313955007 -0.0947595777 -0.0254687302 0.1004315752 0.2032722419 -0.0544346319 0.0466962018 0.1013763959 0.0948237626 -0.0796124715 -0.1046925812 -0.0974251976 0.0790150801 0.1121686968 0.1310832750 -0.1587706499 -0.1598488670 -0.0162873636 -0.0194084321 -0.0236555463 0.0368314226 0.0182928004 -0.0295439620 0.0170838820 -0.0005778908 -0.0486172087 0.0135072970 0.0067391290 -0.0135732996 -0.0325398348 -0.0085989940 0.0529143279 -0.0067785910 0.0063697589 0.0415683621 -0.0224578351 -0.0125940119 0.0513313348 0.0039237469 -0.0284134490 -0.0578283554 0.0143947010 -0.0068690485 -0.0668611373 -0.0426903183 -0.0328436872 -0.0155077781 -0.0539192160 -0.0447278538 -0.0169483542 0.0185266806 0.0133039565 -0.0190399838 -0.0913446447 -0.1007355736 0.0477165498 -0.0006180996 -0.0005789821 -0.0019754546 -0.0933870538 0.0434821345 0.1462591838 0.0912094941 -0.1042440536 -0.1813577227 0.0089167448 0.0461290444 0.0458372718 0.0014443819 0.0025279416 0.0008713951 -0.0005771515 -0.0017156004 0.0001540709 -0.0009277165 -0.0015737489 -0.0001545148 -0.0007188912 -0.0028406974 -0.0005075756 -0.0196411461 0.0054287565 0.0206230443 -0.0065398540 -0.0045852696 0.0003541619 -0.0063262286 -0.0089789006 -0.0031677966 -0.0024694474 -0.0030515969 0.0184933983 0.0041731845 -0.0007380509 -0.0113526245 0.0007451778 -0.0080398673 0.0108483657 0.0072845838 -0.0114194607 -0.0027106885 -0.0180693575 0.0031113767 -0.0116997999 0.0069805859 -0.0025986205 -0.0081885708 -0.0024613861 0.0041004074 0.0036828366 -0.0022340529 0.0016639766 0.0019696509 0.0086082018 -0.0082332974 -0.0465762707 0.0205269025 -0.0368166400 -0.0198501781 -0.0149011318 -0.0021040787 0.0167772839 0.0004994793 -0.0019402105 -0.0036854905 -0.0004163434 0.0011154136 0.0021818731 0.0034374761 -0.0010681230 -0.0051557319 -0.0000787087 0.0029332239 0.0055923916 0.0013934505 -0.0009226705 -0.0025475512 -0.0038906604 0.0002756727 0.0038490023 -0.0041802330 -0.0017664112 0.0020794638 -0.0066888539 -0.0015935235 0.0036006418 -0.0032736776 0.0002545403 0.0086841561 -0.0014861081 -0.0004357847 -0.0045483778 0.0045563357 0.0003264228 -0.0034253351 -0.0004672588 0.0008765324 0.0009486825 -0.0004134480 -0.0002431920 -0.0009607945 -0.0003402798 0.0010213852 0.0015151041 0.0004836376 -0.0009094226 -0.0011198775 0.0005247236 0.0002063824 0.0012904931 0.0012429273 -0.0008835821 0.0004247080 0.0019834636 -0.0002082850 0.0000996240 0.0016727219 0.0001990182 0.0039056014 -0.0009541809 -0.0000150251 -0.0004974192 -0.0014410634 0.0015371848 -0.0007656239 0.0025140821 -0.0001496791 -0.0062783550 -0.0001776306 -0.0003723547 -0.0012659659 -0.0013242256 0.0000474173 -0.0025651609 0.0000566337 -0.0004325662 -0.0007186503 0.0008591928 -0.0026152566 -0.0007994703 0.0004490488 0.0026820984 0.0000884872 0.0017113282 0.0015182072 -0.0008062583 -0.0024613317 -0.0027705431 0.0011397498 -0.0007690743 0.0024504553 0.0007240202 0.0024855249 0.0035326969 -0.0010748784 -0.0001933020 -0.0011833188 -0.0000063265 0.0002070326 0.0023565070 0.0000903481 -0.0001503021 -0.0013493686 0.0000164193 0.0012479365 -0.0012553537 -0.0007969740 -0.0003363682 -0.0000275711 -0.0001769578 0.0010235195 -0.0001239528 0.0004984887 -0.0003746910 -0.0000675630 -0.0002184158 0.0004036564 -0.0001057839 0.0002404889 0.0002790321 -0.0002325402 0.0002238040 -0.0001464211 -0.0011231632 0.0000511064 0.0006319150 -0.0006108950 0.0003840245 -0.0007956045 0.0010236783 -0.0005118333 -0.0004510087 -0.0006356407 -0.0002382470 0.0001652255 -0.0018075053 0.0002172796 0.0020554807 0.0025839766 -0.0167512221 0.0395111733 -0.0036854546 0.0680968579 0.0254978316 -0.0553432604 -0.0801017207 -0.0730639026 -0.0085807407 -0.1004419659 0.0085639612 0.0044201585 -0.0136012762 0.0966805194 -0.0429022885 -0.0729977918 -0.0455310079 -0.0641639834 0.0529305592 0.0778510902 0.1079414204 -0.0699106678 0.0543386511 -0.1540789522 -0.0449330648 0.2036831639 0.0625373295 -0.0736653655 -0.0807486449 0.1111020576 0.0523469722 -0.0969607304 -0.1111590914 0.0274313515 0.1103067249 0.1295761649 -0.0348138382 -0.0381770221 0.0817844440 -0.0160651521 0.0430752336 -0.0538720795 0.0144907244 0.0797263495 0.0472009888 0.0384477747 -0.0700947776 -0.0727709585 -0.0332616373 -0.1225840765 0.0794948223 -0.0468491632 0.0079042730 0.0012741127 0.0013441758 -0.0107734657 0.0013772406 0.0024797443 0.0002426218 -0.0012500003 0.0017657819 0.0003168744 0.0001537663 -0.0002822280 -0.0007547378 -0.0002454456 -0.0005164612 0.0047618627 -0.0057706657 -0.0101159149 -0.0021283163 -0.0025601930 -0.0001720283 0.0015010607 0.0004636961 -0.0019061882 -0.0003799109 -0.0002010373 0.0009307915 -0.0002330538 0.0009685567 0.0018004751 -0.0015119714 0.0004881324 0.0032724222 0.0005271055 -0.0007046203 -0.0014768352 0.0011524780 -0.0004835071 -0.0028141242 -0.0016790130 -0.0018229977 0.0000143553 0.0011628647 -0.0013629117 -0.0040351461 -0.0008702761 -0.0014889526 -0.0026372877 -0.0017842600 0.0014003323 0.0019877537 0.0016249077 -0.0014203583 -0.0010915347 -0.0020743485 0.0048499087 0.0004795592 0.0005996227 0.0004620215 0.0000678452 -0.0016763992 -0.0009522001 0.0005551905 -0.0004092220 -0.0000345427 0.0011217976 -0.0004106174 -0.0001517189 0.0004649093 0.0011088324 0.0003525404 -0.0015885029 0.0004901036 0.0002531065 -0.0007505752 -0.0011399440 0.0014571522 0.0007051221 0.0002391861 0.0008285981 0.0020509173 0.0000594736 0.0002931840 0.0014124531 0.0014957209 -0.0008587494 -0.0000739986 0.0017606101 0.0012510831 0.0000247622 -0.0002795993 -0.0002053299 0.0004818558 0.0012085425 0.0006613503 -0.0016729950 0.0059347771 -0.0280507516 -0.0534328734 0.0037417245 -0.0018981915 -0.0061921688 -0.0035370604 0.0048518909 0.0080525425 -0.0005463647 -0.0022896207 -0.0022876198 0.0001305849 0.0000798348 0.0002003076 0.0000337048 0.0008101583 -0.0005120475 -0.0000477596 0.0002628732 0.0004307524 -0.0000425059 0.0001577505 -0.0000285452 0.0007958613 -0.0003021562 -0.0009262458 0.0001722781 0.0002562188 0.0001455656 -0.0033691707 -0.0065297614 -0.0005144486 0.0000695122 0.0001072676 0.0066171184 0.0020572134 -0.0033840614 -0.0024621196 0.0010367687 0.0010711365 0.0006708726 -0.0015245437 -0.0043429424 -0.0012755898 0.0003663507 0.0001451116 -0.0064832278 0.0003132856 0.0002081568 -0.0005205058 -0.0002161561 -0.0003218867 0.0005366098 -0.0001575744 -0.0008447165 -0.0006239355 -0.0001239193 0.0004351673 0.0013584578 -0.0001975403 0.0011514102 0.0005343221 0.0007732310 -0.0001776067 -0.0011403430 -0.0205526984 -0.0454219496 -0.0775142552 0.0479549552 0.0465260564 0.0459262832 0.0250502118 -0.0357580493 -0.0828325899 0.0100555719 0.0757748909 0.1337139024 -0.0332379831 -0.0491973019 -0.0619328902 -0.0318252472 0.0187587536 0.0628573966 -0.1171021045 -0.0359694833 0.0086133193 -0.0945543218 -0.0326941024 0.0033856507 0.0088776242 0.0043202077 0.0626429640 0.0676836694 0.0045181554 -0.0455654644 0.0888755379 0.0254134455 -0.0405423594 -0.0188475820 0.0310422613 0.0335834201 -0.0247259089 -0.0109197765 -0.0545471044 0.0088276573 0.0383050050 0.0882046004 0.0100544391 -0.0292141685 -0.0421485080 0.0247444868 0.0016647211 0.0413432732 0.0631365641 -0.0372803658 0.0033242326 0.0505786183 -0.0350027395 -0.0003908964 -0.0006555488 0.0095319120 0.0438866396 -0.0395364432 0.0141334798 -0.0274576207 -0.0506727377 0.0315621478 -0.0213635646 0.0143255883 0.0003315667 -0.0401664535 -0.0230685896 -0.0080032792 -0.0237393298 -0.0119526709 0.0011600211 -0.0262358418 0.0121790782 -0.0115905314 -0.0178692137 -0.0358581578 -0.2393955685 -0.0109319137 0.0643595355 0.2427089975 -0.0056588895 0.1136983888 0.1047138582 -0.0526717405 -0.1482330387 -0.2011028541 0.0650388713 -0.0712319132 0.1696689102 0.0591527457 0.1587351158 0.1873643314 -0.0735046322 0.0296580554 -0.1299637019 -0.0307225065 -0.0253660011 0.2247908387 0.0355580511 -0.1051293184 -0.1148605465 0.0533794927 0.0807189218 -0.1873386964 -0.0601386102 0.0066030455 0.1476004001 -0.0017307514 -0.0299805600 -0.1421007072 -0.0128651744 -0.0403539646 -0.0676780241 -0.0190758068 0.0569405027 0.1253007576 0.0234397263 0.0340123027 -0.0860609603 0.0300725144 -0.0828939496 -0.0872395229 -0.0383092374 -0.0477936334 0.0855534078 -0.0308407774 0.0499485002 -0.1501671892 0.0375983534 0.0743067595 0.0860997316 0.0378276922 -0.0569645527 0.1473390316 -0.0419765097 -0.0000119852 -0.0000448252 0.0007342701 -0.0017460560 0.0004363952 -0.0029814874 -0.0013271772 0.0015947792 0.0027716410 0.0027021437 0.0005378400 0.0036124587 -0.0002775561 -0.0000709304 0.0005652524 -0.0043300809 0.0011159671 0.0024737626 0.0015671780 0.0019271258 -0.0015168266 -0.0032860705 -0.0044334820 0.0028647398 0.0114880539 -0.0959352591 -0.0185270592 0.0814014448 0.0427468051 -0.0251152571 -0.0238320440 0.0593979404 0.0190071259 -0.0621460656 -0.1344153601 0.0196730581 0.0794423832 0.1068008344 -0.0281912409 0.0670537092 -0.1848491147 0.0359874259 -0.0400537159 0.1939115718 -0.0273907702 -0.0926946274 -0.0787755805 -0.0451509400 0.0862959022 0.1354019282 0.0429689875 0.1406242620 -0.1175139586 0.0494866345 -0.0092462012 0.0052687787 -0.0036471984 -0.0057360873 -0.0042917491 0.0026562391 0.0018564207 0.0000342526 -0.0005368806 -0.0005899859 0.0009322974 0.0006510300 -0.0003092709 -0.0005191232 -0.0002950372 0.0080192599 -0.0077796252 -0.0138972818 -0.0003498716 -0.0006739175 -0.0004522342 0.0000543599 -0.0003125514 -0.0005558502 0.0008597744 0.0004678022 0.0000464940 0.0002151506 0.0008395700 0.0008801469 -0.0003695947 0.0004194036 0.0011949693 -0.0001775528 -0.0009176390 -0.0006758895 0.0005177577 -0.0001289245 -0.0013121267 -0.0006301203 -0.0007578062 -0.0002653932 0.0006330485 -0.0002230867 -0.0013875217 -0.0009827661 -0.0006613015 -0.0009871090 -0.0015471582 0.0012704543 0.0021486908 0.0007609649 -0.0008823806 -0.0015851476 -0.0023654751 0.0026687919 0.0021642412 0.0010525289 0.0006386482 0.0000253150 -0.0020955530 -0.0012224468 0.0006881914 -0.0007302545 -0.0001801791 0.0013731277 -0.0006212944 -0.0003618709 0.0001526911 0.0012807377 0.0005564025 -0.0014809219 0.0007913544 0.0004823272 -0.0006240426 -0.0003624153 0.0008144571 -0.0007829646 0.0001514321 0.0007675551 0.0022912888 0.0004921298 0.0000982551 0.0015362586 0.0014068908 -0.0004406809 -0.0005161967 0.0024666682 0.0015933761 -0.0000329384 -0.0003258741 -0.0003669017 0.0004618391 0.0013892262 0.0022049315 -0.0025525882 -0.0022689437 0.0455524291 0.0989632979 0.0012056257 -0.0005519497 -0.0015962056 -0.0012671437 0.0007758858 0.0017685022 0.0000349334 -0.0002275807 -0.0002370637 -0.0003343871 -0.0003512826 -0.0003515234 0.0000050324 -0.0013130612 0.0008661206 0.0001437783 -0.0001923414 -0.0009242631 0.0001284071 -0.0000347580 0.0000598032 0.0003161319 0.0000211923 -0.0002128350 0.0001065443 0.0000720361 0.0000008703 0.0065474251 0.0124210971 0.0011361977 -0.0002302126 0.0000941075 -0.0134636468 -0.0040854537 0.0063814647 0.0053121802 -0.0018888214 -0.0025867698 -0.0002449843 0.0030674965 0.0076624620 0.0020434589 0.0001587742 -0.0002110475 0.0129249566 -0.0012632329 -0.0001370237 0.0016750623 0.0005425330 0.0003046026 -0.0011453262 0.0006077054 0.0012361304 0.0008360008 -0.0005729675 -0.0001421129 -0.0000091309 -0.0002917460 -0.0003090410 0.0001506986 -0.0000497673 0.0003507221 0.0002318763 -0.0074435634 -0.0281033191 -0.0525129259 0.0316243194 0.0303038299 0.0290965607 0.0137307151 -0.0230958191 -0.0516832527 0.0087637949 0.0493975414 0.0854490674 -0.0246493785 -0.0332757138 -0.0401877018 -0.0189947069 0.0128346797 0.0408987118 -0.0726997101 -0.0234296906 0.0057758796 -0.0578706866 -0.0213250557 -0.0007620025 0.0053673785 0.0028267243 0.0414054545 0.0474989011 0.0055567092 -0.0277111999 0.0586295970 0.0178161686 -0.0254876576 0.0355090157 -0.0569646166 -0.0591655299 0.0393940773 0.0212382473 0.0942703039 -0.0119844139 -0.0704258709 -0.1562530418 -0.0231059093 0.0563842505 0.0761152706 -0.0413054086 -0.0051145880 -0.0742212148 -0.1092342065 0.0667893911 -0.0055264697 -0.0848937371 0.0610950110 0.0060432792 0.0005161391 -0.0170571110 -0.0799358305 0.0759063882 -0.0311274400 0.0451623633 0.0913238979 -0.0588883935 0.0357534650 0.0094105088 0.0002045631 -0.0263975864 -0.0149805174 -0.0052291896 -0.0155409875 0.0216735449 -0.0020876387 0.0475507419 -0.0218539676 0.0209171841 0.0323600411 -0.0343319194 -0.1395088339 0.0002072321 0.0340586089 0.1528735842 0.0010497486 0.0650568953 0.0567345373 -0.0305138139 -0.0802709916 -0.1105763103 0.0351201671 -0.0476264932 0.0945700188 0.0366677605 0.0844464374 0.0980042441 -0.0395022738 0.0211214196 -0.0780014477 -0.0204724848 -0.0170606342 0.1280168716 0.0219329913 -0.0791100792 -0.0637648509 0.0418820151 0.0437084065 -0.1122820733 -0.0338056547 -0.0217353842 -0.2505781579 -0.0048528553 0.0301047659 0.2331161657 0.0119058078 0.0714463140 0.1104950009 0.0342653540 -0.0938708914 -0.1963711038 -0.0396064055 -0.0749568241 0.1415331104 -0.0549885559 0.1313530999 0.1487221803 0.0602408384 0.0748058843 -0.1295459265 0.0480982003 -0.0731368267 0.2272836319 -0.0555914131 -0.1225544214 -0.1283667819 -0.0617893738 0.0855615775 -0.2142323878 0.0630847522 -0.0000951909 -0.0000679465 0.0002271958 -0.0006161323 0.0002398013 -0.0006363218 -0.0000326158 0.0004486206 0.0005427562 0.0010918941 0.0006839529 0.0008287300 -0.0003057925 -0.0001526341 0.0001685581 -0.0002588773 0.0009421319 0.0010014419 0.0015423526 0.0009575908 -0.0013713056 -0.0001618925 -0.0006147373 0.0010374802 0.0512069802 0.0257004478 -0.0123269806 0.0798551851 -0.0261149897 -0.0302069440 -0.0595195187 0.0020898594 0.0271590210 0.0467376842 0.0683234305 -0.0213688830 -0.0597944373 -0.0571241444 0.0239556739 -0.0857501805 0.1590423605 -0.0428382990 0.0731050754 -0.1404013772 0.0427933862 -0.0729403071 0.0549677082 -0.0306858307 0.0415780917 -0.1091341024 -0.0054924728 0.1112314553 0.0355803092 0.0276666392 0.0085262174 -0.0063498343 0.0044715482 0.0039686426 0.0034617976 -0.0022733149 0.0012112498 -0.0005304422 -0.0003012756 -0.0011518877 0.0009779831 0.0006579714 -0.0012277141 -0.0004259855 -0.0001699442 0.0105299171 -0.0101345336 -0.0179169594 0.0018391954 0.0011859099 -0.0014074070 -0.0019351934 -0.0017388832 0.0007241179 0.0026184771 0.0016166713 -0.0010111646 0.0013147384 0.0018148416 0.0004498061 0.0007245353 0.0006096898 -0.0004326946 -0.0008777929 -0.0015106700 -0.0001942872 -0.0008132928 -0.0006039960 0.0003247697 -0.0000953724 -0.0012640315 -0.0018932600 0.0006772493 0.0007669368 0.0001937918 -0.0021118903 -0.0005745350 -0.0003112565 -0.0011155916 0.0010823491 0.0021901513 -0.0005616571 -0.0004749506 -0.0013405177 -0.0020444019 0.0013576752 0.0004768356 0.0041896518 0.0025401220 -0.0003952201 -0.0058237248 -0.0036446490 0.0012259527 -0.0024137902 -0.0010486544 0.0025254639 -0.0025846746 -0.0019368611 -0.0008176911 0.0032658212 0.0017164873 -0.0025759546 0.0029013856 0.0022258519 0.0001708561 -0.0008164758 0.0002805306 -0.0031788031 0.0003225636 0.0012685285 0.0055864078 0.0013279691 0.0009533828 0.0043242445 0.0020028296 -0.0014044742 -0.0033911934 0.0066815361 0.0041274094 -0.0009167916 -0.0000590897 -0.0001589264 0.0002614633 -0.0008876663 -0.0003029873 -0.0014383840 0.0017560104 0.1401943603 0.2435835106 -0.0002244370 0.0001670932 0.0010301288 -0.0000734198 -0.0016622466 -0.0018751036 0.0004310381 0.0010672008 0.0010229549 -0.0007716966 -0.0007583389 -0.0007955683 0.0000530033 -0.0030642431 0.0020802200 0.0002139964 -0.0005464910 -0.0019787115 0.0003084494 -0.0001645809 0.0001315879 0.0001100357 0.0002336571 0.0001740793 0.0000680667 -0.0000102380 -0.0000492171 0.0145265836 0.0283100227 0.0020848033 -0.0008423553 0.0001960598 -0.0306661099 -0.0090588504 0.0145737044 0.0115781713 -0.0037843238 -0.0047020594 -0.0014050421 0.0063942535 0.0173770265 0.0047650855 0.0011730453 -0.0008179681 0.0285434815 -0.0027981341 -0.0003725058 0.0035806441 0.0012150882 0.0008979169 -0.0025883172 0.0012983826 0.0029102439 0.0020098592 -0.0010090844 -0.0005646642 -0.0010802138 -0.0002805246 -0.0014599321 -0.0001368773 -0.0006266916 0.0007860255 0.0010984725 -0.0210215090 -0.0560504659 -0.0767753249 0.0308905308 0.0390656639 0.0441754825 0.0304423150 -0.0276969451 -0.0740935748 0.0052281948 0.0614914326 0.1106014454 -0.0273006675 -0.0401442089 -0.0515137923 -0.0254545509 0.0206297765 0.0566616472 -0.0871309854 -0.0260446450 0.0222502682 -0.0863829320 -0.0249530680 0.0144596452 0.0083876119 0.0052863119 0.0618295406 0.0582097962 0.0040443535 -0.0363156821 0.0760243651 0.0211035855 -0.0224515274 0.0584901701 -0.1184484377 -0.1375513863 0.0947565328 0.0358235890 0.2026187838 -0.0256480792 -0.1441573837 -0.3213644778 -0.0579226303 0.1231685838 0.1593229140 -0.0787802341 -0.0277983600 -0.1639157868 -0.2079404492 0.1351264893 -0.0474596530 -0.1873893173 0.1287900182 -0.0064297726 0.0013340343 -0.0426525842 -0.1928301722 0.1710877231 -0.0753185946 0.0820885449 0.1915677559 -0.1207250648 0.0364451252 0.0131516380 0.0000096518 -0.0382694811 -0.0211102495 -0.0075463650 -0.0225377492 0.0492513958 -0.0039022381 0.1107387850 -0.0498480308 0.0485199125 0.0762966463 0.0339387918 0.0343313535 -0.0133545733 -0.0094842526 -0.0361612179 0.0001543765 0.0087346366 -0.0053338883 -0.0054816507 -0.0107222582 0.0099768736 0.0071153101 -0.0005761837 -0.0013734469 0.0004307015 -0.0014790570 0.0252815577 0.0034515364 -0.0259176162 0.0295144432 0.0183889234 0.0217446975 -0.0404722632 -0.0166650203 0.0455281896 0.0166524187 -0.0258023616 -0.0012028866 0.0631610061 0.0055839983 0.0046403810 0.1232653491 -0.0006579635 0.0272744687 -0.1374494147 0.0176784315 -0.0829687181 -0.0613440456 -0.0447612650 0.0879643395 0.1068861895 0.0430790714 0.0854534956 -0.0908621664 0.0590003734 -0.0704690627 -0.1475762586 -0.0263144122 0.0034497319 0.0354136456 0.0002264094 -0.0088160710 -0.0656982604 -0.0009192599 0.0253156397 0.0344999400 0.0129077100 -0.0390475585 0.0051668243 -0.0226936871 -0.0001442359 -0.0000671575 -0.0000695990 0.0000148996 0.0001892112 0.0007905872 0.0007166423 -0.0002459608 -0.0008166254 0.0002133300 0.0008398010 -0.0007972448 -0.0002490709 -0.0001929700 -0.0000983261 0.0022170468 0.0012149781 0.0004175328 0.0007574523 0.0009353895 -0.0011709351 0.0009435710 0.0009160436 -0.0001197068 0.0736213778 0.0857427299 -0.0021466339 0.0965043256 -0.0669715676 -0.0267529434 -0.0865721181 -0.0261876009 0.0342797328 0.1143440482 0.0783190293 -0.0435110341 -0.1251333098 -0.1090700873 0.0441976520 0.0233251787 -0.0386898277 0.0084687642 -0.0346592450 0.0151080310 -0.0104808141 -0.0041591879 -0.0228891311 -0.0035039968 0.0107949754 0.0386082955 0.0136114798 0.0026721043 -0.0271103410 0.0092779166 -0.0031783860 -0.0000140812 -0.0010947028 0.0095021334 0.0024866585 -0.0042675822 0.0008344719 0.0004625828 0.0011449118 -0.0004381613 -0.0000827846 -0.0004230890 -0.0008853129 -0.0007067096 -0.0011249439 0.0109888762 -0.0126869236 -0.0218385799 0.0013704742 -0.0001101607 -0.0023840461 -0.0021810468 -0.0025530308 -0.0001436109 0.0036898988 0.0023466971 -0.0012190831 0.0022361737 0.0040295861 0.0021217595 0.0000034769 0.0011466899 0.0015394750 -0.0006139021 -0.0023972666 -0.0011581821 -0.0014962403 -0.0022373579 -0.0010653762 -0.0017391556 -0.0044703541 -0.0039124802 0.0019710974 -0.0001433663 -0.0029493138 -0.0052174287 -0.0032846919 -0.0038228893 -0.0026446719 0.0018314953 0.0031609811 0.0008122722 -0.0015847000 -0.0001860903 -0.0018495790 0.0072412371 -0.0041816236 0.0050464543 0.0030802772 -0.0010313355 -0.0080458588 -0.0049926093 0.0015696925 -0.0028898714 -0.0011864404 0.0035770910 -0.0030419444 -0.0022087455 -0.0001655432 0.0046712134 0.0021100493 -0.0043588067 0.0036413092 0.0027795319 -0.0003284199 -0.0036493347 0.0028171467 -0.0007407374 -0.0001460796 0.0034869776 0.0077874200 0.0012582089 0.0021408739 0.0054478592 0.0037198041 -0.0035794015 -0.0038635161 0.0087743640 0.0056806564 -0.0012777145 0.0001839020 0.0000957655 0.0005423302 -0.0017762800 -0.0002629635 -0.0022153026 -0.0045457567 -0.0521401131 -0.0949555168 0.0066938201 -0.0035483967 -0.0109580037 -0.0062598747 0.0088457655 0.0145943735 -0.0010642268 -0.0043247759 -0.0042430417 0.0002529946 0.0001948079 0.0003442235 -0.0000308043 0.0012231509 -0.0008661052 -0.0000900877 0.0004079714 0.0006380653 -0.0000943409 0.0002522926 -0.0000587506 0.0014998577 -0.0005331624 -0.0016938227 0.0002156235 0.0005017964 0.0003795722 -0.0048145372 -0.0095959316 -0.0005346172 0.0007824982 0.0000852953 0.0102476137 0.0030077573 -0.0052918184 -0.0035299506 0.0016690143 0.0017568689 0.0013037303 -0.0022970702 -0.0068340097 -0.0020521632 0.0005125849 0.0002249141 -0.0102772731 0.0005262927 0.0003284971 -0.0008498206 -0.0003466780 -0.0004315890 0.0008494716 -0.0001456082 -0.0013197822 -0.0009862659 -0.0001185249 0.0008076003 0.0018248281 0.0000792324 0.0016384069 0.0007244696 0.0013411305 -0.0003699825 -0.0021187841 -0.0465638568 -0.1602717368 -0.2281359461 0.0969287475 0.1162805078 0.1256132486 0.0746463900 -0.0806381906 -0.2051469033 0.0247957306 0.1794442466 0.3154799249 -0.0947269678 -0.1230016367 -0.1486685238 -0.0620722263 0.0629661022 0.1605714357 -0.2465162673 -0.0800653037 0.0628004977 -0.2358820118 -0.0747160388 0.0282879428 0.0239272303 0.0151650993 0.1775635034 0.1837187393 0.0237632134 -0.0960704236 0.2166385532 0.0652403359 -0.0537814502 -0.0260378928 0.0482710100 0.0521642457 -0.0303677363 -0.0160079091 -0.0738679694 0.0061215027 0.0569174330 0.1213359522 0.0281879477 -0.0517498986 -0.0612723127 0.0250799744 0.0136162840 0.0611038152 0.0784732661 -0.0542085912 0.0164404824 0.0659386264 -0.0483997557 -0.0033304252 -0.0009921274 0.0165832672 0.0736379415 -0.0703807496 0.0349659092 -0.0266841593 -0.0705285474 0.0467551224 -0.0082943957 0.0376083191 0.0000482395 -0.1092934936 -0.0609558331 -0.0218221013 -0.0651532345 -0.0185299877 0.0014509783 -0.0417935403 0.0192999887 -0.0187805719 -0.0295298450 0.0652269791 0.1171884676 -0.0206819639 -0.0350109212 -0.1091655685 0.0052804006 -0.0002906056 -0.0330220887 -0.0034183378 0.0056187822 0.0598639777 0.0027972693 0.0057112416 -0.0350687676 -0.0078268536 -0.0345776328 0.0170139791 0.0215921720 -0.0603271301 0.0836477085 0.0446365904 0.0507962352 -0.1277421904 -0.0418998883 0.1065000443 0.0562707042 -0.0602754467 -0.0167951241 0.1636492647 0.0219080938 -0.0000393631 -0.0519286753 0.0018807525 0.0016180307 0.0565925330 -0.0010988117 0.0269152909 0.0249180118 0.0143778122 -0.0307979373 -0.0461658149 -0.0143939040 -0.0275556723 0.0357240324 -0.0220387404 0.0290852375 0.0481274742 0.0120007876 0.0068134788 -0.0232280576 0.0049223017 -0.0063297818 0.0409057845 -0.0060718503 -0.0181028485 -0.0232388600 -0.0095838775 0.0186958057 -0.0255561526 0.0122553295 -0.0000420441 -0.0000705253 0.0013180262 -0.0031549586 0.0009587566 -0.0051473861 -0.0022404523 0.0023898410 0.0043485370 0.0046855250 0.0013340303 0.0058515375 -0.0006035347 -0.0001627525 0.0010875671 -0.0067416720 0.0019448315 0.0041197514 0.0031607888 0.0037437974 -0.0030654161 -0.0055671613 -0.0072404202 0.0044604173 -0.0013261712 -0.0015289158 -0.0000854820 -0.0017570226 0.0011672846 0.0003897470 0.0013186881 0.0004703087 -0.0004836132 -0.0016207349 -0.0010531844 0.0006296634 0.0020727869 0.0011591953 -0.0007592844 -0.0000683013 0.0007838949 0.0000140696 0.0007727871 -0.0000151884 0.0002768762 -0.0016932286 -0.0002798678 -0.0008585866 0.0014893640 0.0002816486 0.0008829504 0.0017843362 -0.0008596296 0.0010333087 -0.0006689772 -0.0005021233 -0.0002161348 -0.0006862873 0.0002577612 -0.0001929291 0.0014073416 0.0016841637 0.0013691009 0.0007372767 -0.0011328163 -0.0012825468 -0.0022242589 -0.0010063118 -0.0016595539 0.0816098377 -0.0721888814 -0.0859520405 0.0456114915 0.0399321188 -0.0199413337 -0.0407026776 -0.0291822838 0.0263378820 0.0378827756 0.0194095939 -0.0296795541 0.0224032644 0.0195241657 -0.0094423942 0.0238498317 0.0046627664 -0.0343094777 -0.0164587095 -0.0122088954 0.0113886910 -0.0297450242 -0.0102371151 0.0360551424 0.0117405270 -0.0101887688 -0.0328965786 -0.0004075454 0.0230420225 0.0369633566 -0.0134021406 0.0140113132 0.0256479957 0.0091809831 0.0022306673 0.0044173894 -0.0567835709 -0.0064279860 0.0284956558 0.0423814030 -0.0534730415 -0.1991821536 0.2747470193 0.1688247009 -0.0577182594 -0.3032520691 -0.1962607072 0.0598570848 -0.1612746018 -0.0761191054 0.1373142535 -0.1618386262 -0.1282828775 -0.0577230395 0.1729041086 0.0923163577 -0.1161327869 0.1679366780 0.1271765064 0.0329363508 0.0061623846 -0.0639463761 -0.2789315963 -0.0148072288 0.0637821779 0.2741283304 0.0524064471 0.0931120202 0.2344110341 0.0541082423 -0.0245866408 -0.2293027111 0.3599717636 0.2347283091 -0.0597785090 0.0056271547 0.0046695029 -0.0040955460 -0.0362399446 -0.0389529313 0.0178467786 -0.0001276120 -0.0013434610 -0.0024758150 0.0037284100 -0.0023772075 -0.0024085464 -0.0020153266 0.0031422618 0.0047556605 -0.0002232434 -0.0016332409 -0.0013561407 -0.0000075941 -0.0000020514 0.0000353774 -0.0000235454 0.0000291596 -0.0000679896 -0.0002930621 0.0000302622 0.0000195954 -0.0000249444 0.0000708640 -0.0000286743 0.0008557402 0.0000704344 -0.0005606883 0.0001883134 0.0000471440 0.0001826140 0.0001342590 0.0002953671 0.0000845215 0.0002037464 0.0000425794 -0.0003292527 -0.0001026511 0.0000300668 0.0001384588 0.0010542563 0.0002874051 0.0010016936 0.0018367410 -0.0005366290 -0.0002969516 0.0008797953 -0.0002755352 0.0002756962 -0.0000536283 -0.0000309167 0.0004664166 0.0001133473 -0.0001270104 -0.0002925166 0.0004274452 0.0001575473 0.0000681622 0.0008648948 0.0003983357 0.0006525701 -0.0011621975 -0.0005684887 -0.0003689256 0.0009250322 -0.0008507707 -0.0003838947 0.0021778235 0.0043628317 0.0056049428 -0.0042796008 -0.0037765311 -0.0032176395 -0.0003493374 0.0025355667 0.0048072662 -0.0011706826 -0.0053707734 -0.0090233033 0.0044465024 0.0043902004 0.0042112107 -0.0000733048 -0.0020327149 -0.0033718953 0.0078683209 0.0031271999 -0.0007553308 0.0052792545 0.0021732287 0.0014868514 -0.0015095894 0.0001964660 0.0005811936 -0.0075833310 -0.0028913863 0.0016164121 -0.0052720945 -0.0021786077 0.0002794681 -0.0011013369 0.0016048922 0.0013459312 -0.0002766322 -0.0006703718 -0.0017139136 -0.0000897592 0.0017058981 0.0032574762 0.0012935343 -0.0018502439 -0.0017014036 0.0000988074 0.0006408230 0.0013810551 0.0020761444 -0.0018253846 0.0002546979 0.0012969621 -0.0013992805 -0.0005466656 -0.0003357410 0.0004474889 0.0012873365 -0.0024338956 0.0018148885 -0.0003054115 -0.0011704173 0.0015875293 0.0002405727 0.0000401147 -0.0001855270 -0.0001689103 0.0011218417 0.0001847486 0.0005796582 -0.0002730171 0.0000203385 -0.0006575957 0.0005358941 -0.0004775657 -0.0007039328 -0.0008199675 -0.0016136973 0.0002648712 0.0003262963 0.0014092839 0.0000043795 -0.0002309037 0.0004202187 0.0001689557 0.0001375540 -0.0006843762 -0.0001506513 0.0001419023 0.0003063042 0.0000189846 0.0003763875 -0.0005543481 -0.0002303461 0.0010463236 -0.0011724671 -0.0007561214 -0.0008239190 0.0017765600 0.0006495572 -0.0016500656 -0.0006952923 0.0010623815 0.0001339263 -0.0023423274 -0.0002170386 -0.0002561240 -0.0002222317 -0.0001227902 0.0004823139 0.0000552860 0.0002313321 -0.0004218576 -0.0000219043 -0.0002609187 0.0003925368 -0.0000101140 0.0002256436 0.0004713200 -0.0001750541 0.0004260926 -0.0000552502 -0.0007984251 0.0000928227 0.0006076615 -0.0004446687 0.0003564019 -0.0006004228 0.0006918459 -0.0003841234 -0.0006590030 -0.0004092707 -0.0002787622 0.0000193344 -0.0012460362 0.0001412603 -0.0007403539 0.0004144433 -0.0004418913 0.0047788073 -0.0071626160 0.0032009908 0.0046068774 0.0048581262 0.0024328320 -0.0007882565 -0.0040455197 0.0036857978 -0.0002166848 -0.0006708814 0.0006585009 0.0098192928 0.0071281113 0.0047044579 -0.0091470164 0.0176998331 -0.0053483311 -0.0098321256 -0.0045874585 -0.0093641099 0.1750326862 -0.0956882142 -0.0992988501 0.2706843194 0.0126196604 -0.1225668785 -0.2001064633 0.0936515944 0.1084803355 0.1216696017 0.0378471153 -0.0606007344 -0.1434701077 -0.0380917205 0.0654255267 -0.1047245244 0.0721553821 -0.0543944109 0.0828321091 -0.0677808162 0.0506115452 -0.1890748389 -0.0201242908 -0.0922239163 0.1676331843 0.0282751204 0.0831794957 0.2191624777 -0.0862526052 0.0981037311 0.0102171664 -0.0044514203 0.0062753972 0.0125335761 0.0016924997 -0.0076754140 0.0059775239 -0.0012713679 0.0005261165 -0.0038474138 0.0035634165 0.0021031031 -0.0041380017 -0.0028518525 -0.0026822433 -0.0040610167 0.0030933361 -0.0002302337 -0.0030375977 -0.0037700355 -0.0008142205 0.0031983497 0.0010621974 -0.0037936066 -0.0037402620 0.0004958009 0.0060287784 -0.0012306186 0.0006901155 0.0032052552 -0.0024000160 0.0018628752 0.0070494184 -0.0002640555 -0.0034363353 -0.0048394201 0.0045213996 0.0003932721 -0.0075288592 -0.0023596000 -0.0007894427 0.0023961549 0.0023323574 -0.0008214198 -0.0065351360 0.0064985017 0.0075282548 0.0025760440 0.0016311705 -0.0004008007 -0.0008602742 -0.0000776305 0.0002855233 -0.0000540666 -0.0010956913 -0.0001269434 0.0032279667 -0.0021322570 -0.0023768275 -0.0036288780 0.0027264515 0.0023983416 0.0025211351 -0.0004625198 0.0011275287 0.0056228968 0.0029064771 0.0035260479 0.0053829872 -0.0002601669 -0.0012861486 -0.0044362585 -0.0028931534 -0.0035952235 -0.0060355010 0.0057635010 0.0006768658 -0.0059727301 -0.0019165528 -0.0040767918 -0.0033679575 -0.0030539638 -0.0015718660 0.0008120017 0.0031605111 0.0053751613 0.0055086622 -0.0026953584 -0.0004865548 0.0037200616 -0.0010329041 -0.0008408734 0.0018853084 0.0073233445 0.0083076758 -0.0099747729 0.0146019744 -0.0511525743 -0.0522342498 -0.0023037173 0.0012663815 0.0033974738 0.0025017932 -0.0024901030 -0.0045294819 0.0001705978 0.0011822497 0.0011223465 0.0002764491 0.0001724714 0.0002164462 -0.0000558672 0.0007853016 -0.0005480972 -0.0000338556 0.0002785069 0.0000588258 -0.0001589986 0.0000060209 -0.0000363547 -0.0007878072 0.0000695609 0.0006180093 -0.0000288240 -0.0001812797 -0.0001548261 -0.0036740291 -0.0076519513 -0.0003355270 0.0000174872 -0.0001225555 0.0080791804 0.0022927940 -0.0036868023 -0.0030691342 0.0006634511 -0.0017678376 0.0055098469 0.0011574224 -0.0061045774 -0.0020708189 -0.0025998552 0.0008536400 -0.0062571831 0.0009366998 0.0000360392 -0.0011585621 -0.0004883588 -0.0001666753 0.0009113650 -0.0003906056 -0.0008223714 -0.0005467304 0.0002883286 -0.0001800682 -0.0003085752 0.0001536771 -0.0002029059 -0.0003102343 -0.0001880070 -0.0000831789 0.0001990574 0.0241175420 0.0621143365 0.0673927394 -0.1105685183 -0.0701700207 -0.0286970913 0.0724953846 0.0297415166 -0.0019361509 -0.0610847584 -0.0566036581 -0.0580231578 0.1285656469 0.0761765543 0.0337343065 -0.0803641189 -0.0377430280 0.0031005719 0.1081028172 0.0767937282 0.0160775811 -0.0123753688 0.0387643036 0.0790234605 -0.0174235270 -0.0092246124 -0.0579097870 -0.1306580715 -0.0741010895 -0.0344476842 0.0096882305 -0.0378134665 -0.0938623864 -0.0876775914 0.0855724747 0.0298890568 0.0691705843 -0.0449686589 0.0094791843 -0.0428665851 0.0523193783 0.0438460939 0.0988147838 -0.0906605216 -0.0342313084 -0.0733952677 0.0533102051 -0.0089263716 0.0766902296 -0.0945759254 -0.0364837909 -0.0341884096 -0.0186404051 -0.0820497188 -0.0105187165 0.0173353967 0.0468371937 -0.0925067094 0.0899921075 0.0500784886 0.0328188539 0.0159702217 0.0958044243 -0.0078482251 0.0002329087 0.0268120842 0.0246241849 0.0094874065 0.0267727820 -0.0068459960 0.0000139292 -0.0181355604 0.0160475905 -0.0160421450 -0.0248909283 0.0381214109 -0.0172054394 -0.0198969635 0.0044469388 0.0371506904 0.0008684481 0.1327154131 0.0261514508 -0.0718815893 -0.1314017701 -0.0657999784 0.0686593199 -0.1031454912 0.1001271818 0.0680554692 0.0624534358 0.1987754600 -0.0168171666 -0.0914774180 0.0428597141 0.0588676957 0.0755599657 -0.0468923399 -0.0491570079 0.0973758367 0.0057070556 -0.0585626875 0.0374496859 0.1546832498 -0.0099344588 -0.0060124794 -0.0325483230 -0.0012456763 0.0371474800 0.0047987708 0.0173452000 -0.0827277557 -0.0074940784 -0.0481881367 0.0710189889 0.0138730337 0.0402825793 0.0739709929 -0.0297267494 0.0458379760 -0.0102903494 -0.1306179336 0.0057463974 0.0984851155 -0.0586073136 0.0578669262 -0.0873856026 0.0904056843 -0.0548601413 -0.1083367875 -0.0521822576 -0.0571554119 -0.0019963708 -0.1758242771 0.0102964086 0.0000470497 0.0000371070 -0.0003386751 0.0009867298 -0.0003646428 0.0013040344 0.0006743044 -0.0009866781 -0.0014028559 -0.0016743179 -0.0004101038 -0.0019384620 0.0000058467 0.0002348335 -0.0006058647 -0.0010154408 -0.0011170521 -0.0010414608 0.0030531871 -0.0048247041 0.0006561882 0.0048754418 0.0028915230 0.0035670022 0.1301629868 -0.0667980560 -0.0737467208 0.1882709992 0.0066467707 -0.0844160285 -0.1504952508 0.0643735447 0.0811087468 0.1268263654 0.0150258609 -0.0506214223 -0.1268728264 -0.0344180635 0.0535986148 0.1230158476 -0.0867026752 0.0590827860 -0.1260017646 0.0695725906 -0.0563858223 0.1870427519 0.0130528090 0.0915848777 -0.1631052767 -0.0231907048 -0.0816235649 -0.2038327085 0.0769018212 -0.0902534753 -0.0087350705 0.0064538289 -0.0082115441 0.0090140971 0.0030767618 -0.0074435342 -0.0011056093 -0.0038808208 0.0051038497 0.0002234717 0.0008712608 -0.0015169586 0.0008355293 0.0013044374 -0.0013567162 -0.0058864256 0.0062606372 0.0107057762 0.0001955590 -0.0004010284 -0.0012884349 0.0001823825 -0.0005148723 -0.0009982800 -0.0010753245 0.0010403192 0.0024434087 0.0003042800 0.0011183426 0.0012301294 -0.0003855690 0.0010693165 0.0024371445 -0.0006439353 -0.0020775421 -0.0021023882 0.0010118203 -0.0003500809 -0.0022161491 -0.0008816824 -0.0009162806 -0.0003459363 0.0011064362 0.0004085295 -0.0022666995 0.0031992569 0.0044148673 0.0023116947 0.0018062067 -0.0014285031 -0.0022521401 -0.0014844738 0.0008735073 0.0015408537 0.0020061851 -0.0028582081 -0.0032036857 0.0013235816 0.0008566003 -0.0002815340 -0.0007579741 -0.0006225359 -0.0000555203 -0.0006353824 -0.0004073340 -0.0000658220 -0.0008111346 -0.0008043471 -0.0009542071 0.0003663663 0.0003993720 0.0005545151 0.0006611864 0.0005787472 0.0007424590 0.0003719061 -0.0012340328 -0.0014255801 0.0003252526 -0.0002998712 0.0007837492 0.0003447355 0.0007655416 0.0000436000 -0.0007843323 0.0004165950 -0.0013416649 0.0008322540 0.0009123760 -0.0005989318 -0.0001805073 -0.0002210420 0.0001391095 -0.0005240336 0.0014243537 -0.0002177782 -0.0362308073 0.0603268791 0.0370516701 -0.0004324546 0.0002432905 0.0007498342 0.0006485009 -0.0004257189 -0.0009115109 0.0000264700 0.0001502662 0.0002621164 -0.0000820311 -0.0000762334 -0.0001748674 -0.0000248563 -0.0006938716 0.0004696824 -0.0001243699 -0.0003181575 -0.0002585007 0.0000065953 -0.0000570180 0.0000362095 -0.0002194969 -0.0000135843 0.0001538838 -0.0000065331 -0.0000556932 -0.0000585811 0.0030368442 0.0061073790 0.0004570751 -0.0000075611 0.0000546344 -0.0064537179 -0.0017969176 0.0031300814 0.0021830538 0.0000406801 0.0013722642 -0.0020881234 0.0002194974 0.0046547186 0.0014333104 0.0019375035 -0.0008040043 0.0051889241 -0.0003871478 -0.0001202658 0.0006674976 0.0002272453 0.0002243293 -0.0005388255 0.0002767578 0.0006940941 0.0004881551 0.0001330281 0.0000296538 0.0000529995 -0.0000247683 0.0002091022 -0.0000194397 -0.0000209678 -0.0000582812 -0.0000801837 0.0355309588 0.0468448448 0.0361675970 -0.1054095242 -0.0598264980 -0.0162316773 0.0801273960 0.0223447573 -0.0218527892 -0.0567687205 -0.0384344377 -0.0274080617 0.1164647276 0.0627107636 0.0185763854 -0.0875012751 -0.0299415980 0.0226064118 0.0954019206 0.0718825160 0.0277390925 -0.0337228898 0.0315644222 0.0816462497 -0.0154328524 -0.0074998971 -0.0378077842 -0.1079948876 -0.0691583973 -0.0423935886 0.0365430030 -0.0309593355 -0.0987078168 0.1133530509 -0.1032746910 -0.0267723455 -0.0990440768 0.0559824859 -0.0305628610 0.0564925924 -0.0540473534 -0.0281298695 -0.1212127665 0.1050087041 0.0291927406 0.1049640552 -0.0661896430 0.0311101274 -0.0918606127 0.1165083110 0.0582798259 0.0597136287 0.0133717912 0.1073749367 0.0142834545 -0.0182468218 -0.0398940233 0.1009241324 -0.1069484486 -0.0708813023 -0.0670066909 -0.0076413741 -0.1283085037 -0.0037551445 0.0002010728 0.0147300528 0.0182242192 0.0071681550 0.0196896745 0.0037280092 0.0003367585 0.0117838347 -0.0159341802 0.0159688741 0.0244524288 0.0245596136 0.0169372055 -0.0097631529 -0.0004245427 0.0030493684 -0.0013447886 0.1182250045 0.0095493960 -0.0654930786 -0.1092614841 -0.0379735955 0.0588322095 -0.0968197659 0.0751981157 0.0606145795 0.0403236809 0.1704658244 -0.0071497784 -0.0973887398 0.0587502813 0.0647542945 0.0784751417 -0.0751928131 -0.0534829452 0.1196875016 0.0170280782 -0.0760494136 0.0287355893 0.1707519405 -0.0039830245 0.0015343063 0.0027624404 -0.0011518695 -0.0234925872 0.0267213888 -0.0115713415 0.1221937698 0.0250108188 0.0711185868 -0.1077795724 -0.0481257653 -0.0590767053 -0.1234237174 0.0617865449 -0.0863122542 0.0287820201 0.1870757361 -0.0005654192 -0.1194884788 0.0536942339 -0.0693134700 0.1012451938 -0.0805283674 0.0621237197 0.1257444752 0.0443750526 0.0656146705 0.0163421980 0.1934027773 -0.0037260535 -0.0000274607 -0.0000129759 -0.0000413818 0.0002734014 -0.0001318215 0.0004266988 0.0005292652 -0.0002658645 -0.0006349680 -0.0003915372 0.0002074337 -0.0007993276 -0.0000126054 -0.0000603311 -0.0000056729 0.0016013929 0.0001988771 -0.0003588016 -0.0008094428 0.0006504051 0.0000549691 -0.0000006144 0.0005684147 -0.0012058006 0.0003054670 -0.0009488528 -0.0005027488 0.0005801776 0.0005362976 -0.0008380430 -0.0006825547 0.0006945487 0.0005373274 0.0002317523 0.0000796157 -0.0001380325 -0.0001382590 -0.0003834816 -0.0001106797 -0.0007160771 0.0011578021 -0.0006388525 0.0007379249 -0.0006973627 0.0004169822 -0.0019402996 -0.0000645871 -0.0008535198 0.0025652537 -0.0006879011 0.0011555354 0.0025303601 -0.0007658113 0.0009471502 0.0000478157 0.0002585557 0.0003140509 -0.0002982720 0.0006905995 0.0004154564 0.0012028570 -0.0020288622 -0.0017597953 -0.0020546912 0.0019312440 0.0021405117 0.0013672576 0.0046008257 0.0014375448 0.3472736277 -0.3350174694 -0.5737743999 0.0692964066 0.0818164961 0.0077169849 -0.0710966735 -0.0310854591 0.0756084608 0.1050116226 0.0012013416 -0.1278037886 0.0248139130 -0.0117475657 -0.0614491569 0.0557072462 -0.0276395787 -0.1397768077 -0.0183210572 0.0408982216 0.0879533049 -0.0685678922 0.0109538145 0.1377397761 0.0531796653 0.0274537926 -0.0385420655 -0.0480950280 0.0374023802 0.1430392028 -0.0803490092 -0.1105358230 0.0126415392 -0.0980471262 0.0676018114 0.1120684573 0.0633386793 -0.0407858575 -0.0715327343 -0.0831279993 0.0845009099 0.1492093083 -0.0297333300 -0.0324120048 -0.0418780919 0.0221098365 0.0264006426 0.0443050421 -0.0084432128 0.0181274459 0.0949759987 0.0380845985 0.0506031636 0.0954233935 0.0095614783 -0.0168397422 -0.0923522581 -0.0366793308 -0.0502007560 -0.0986720901 0.0728798209 0.0310076232 -0.0824591757 -0.0556938091 -0.0400621967 -0.0620719728 -0.0612478663 -0.0277990378 0.0674148332 0.0664774715 0.0658109867 0.0825158239 -0.0189737231 0.0024508752 0.0606027708 0.0131690901 0.0099194349 -0.0177216259 -0.1776445775 -0.1954834711 0.0973127532 -0.0035592887 0.0018655950 -0.0018954729 0.0332573158 -0.0183834690 -0.0443425656 -0.0333402060 0.0314288456 0.0587085840 -0.0026604573 -0.0144825679 -0.0143457993 -0.0003528673 -0.0002735673 -0.0001905467 0.0002378668 0.0003359793 -0.0000053033 0.0002617050 0.0001095567 0.0002637373 0.0002843561 0.0006240419 0.0000709454 0.0083961699 -0.0005272196 -0.0069889322 0.0015362920 0.0017085627 0.0003755390 0.0013784647 0.0021534343 0.0004873034 0.0001208453 0.0007098551 -0.0043773744 -0.0009774810 0.0007192526 0.0027306151 0.0007803681 0.0054270843 -0.0059843187 -0.0041311931 0.0047675473 0.0013708124 0.0062809858 -0.0014350860 0.0023434128 -0.0017199937 0.0005779578 0.0021225104 0.0006341310 -0.0010421052 -0.0008557404 0.0002105290 -0.0000551619 -0.0003045165 -0.0036226792 0.0020261064 0.0106294813 -0.0040871084 0.0075050294 0.0043973595 0.0035860044 0.0015897386 -0.0039647942 0.0020838626 0.0028210254 0.0028998072 -0.0051573978 -0.0035523841 -0.0013924597 0.0027406427 0.0021154482 0.0021373527 -0.0029598235 -0.0049765273 -0.0075863627 0.0053682073 0.0045864759 0.0036297591 -0.0019111832 -0.0016270520 -0.0012500565 0.0048754708 0.0052791909 -0.0006259001 0.0015126869 0.0045275838 0.0028914385 0.0015397675 0.0015243761 0.0086627530 -0.0067421745 -0.0038063011 0.0019068525 -0.0026390169 -0.0023506177 -0.0008447555 0.0040264339 -0.0029411677 0.0001731684 -0.0043351936 0.0017394835 -0.0028087183 0.0020665597 -0.0005679131 0.0017587954 -0.0034276002 0.0023432235 -0.0003826235 0.0044194936 -0.0019686461 0.0029505830 -0.0025440412 0.0037366708 0.0030882485 0.0033495571 -0.0005489522 0.0037197482 0.0000867957 -0.0000760231 0.0001554952 0.0016059576 -0.0019773080 -0.0029051104 -0.0038307717 0.0013957615 -0.0045908510 0.0006537073 -0.0002143073 -0.0037866597 -0.0017570994 -0.0007142152 -0.0025680020 -0.0001217638 0.0000032619 -0.0003209391 0.0000334498 0.0000326249 0.0000783785 0.0001897059 -0.0004442794 -0.0001360246 -0.0000180289 0.0004006166 0.0000510975 0.0002683429 0.0002342652 -0.0001178978 -0.0003356863 -0.0003323247 0.0001641730 -0.0002679874 0.0003921669 0.0000822780 0.0003050385 0.0005240632 -0.0001664520 -0.0000520853 -0.0001002369 0.0000239060 0.0000733231 0.0002285179 -0.0000221251 0.0001738308 -0.0001998081 -0.0001151895 0.0001420345 -0.0000171412 -0.0001019971 0.0001014260 0.0000197412 0.0000909580 0.0001321257 -0.0002716589 0.0000366715 -0.0010245315 -0.0002262991 -0.0005812058 0.0008778551 0.0004111542 0.0004838148 0.0008284994 -0.0005323579 0.0004522626 -0.0002930923 -0.0016252908 -0.0000258295 0.0011287366 -0.0004395335 0.0006536315 -0.0009040585 0.0007155322 -0.0005510238 -0.0011156163 -0.0003229015 -0.0005931123 -0.0001973246 -0.0015589982 -0.0000067133 -0.0015395364 -0.0009641822 0.0036974997 -0.0123267726 0.0021250426 -0.0160368975 -0.0085519220 0.0210039369 0.0271778415 0.0286533776 0.0027272913 0.0366196614 -0.0008323612 -0.0000784684 0.0027637080 -0.0356141990 0.0181178457 0.0261621542 0.0072425147 0.0216218809 -0.0135400197 -0.0354918782 -0.0477815934 0.0265959859 0.1433982410 -0.0260783536 -0.0686807289 0.1365990807 0.0042249561 -0.0520635396 -0.0985628668 0.0441834550 0.0497202804 0.0615282418 0.0122497822 -0.0270281429 -0.0788383667 -0.0195449198 0.0367553507 0.0175591206 -0.0139080676 0.0079738276 -0.0203822895 0.0092863715 -0.0065239877 0.0217947977 0.0007861277 0.0101228171 -0.0277690381 0.0044434727 -0.0128318156 -0.0225504024 0.0084175660 -0.0083625590 -0.0002177497 0.0012288418 -0.0013586400 0.0091089374 -0.0009159820 -0.0049034021 -0.0004748644 -0.0007111685 0.0016396041 0.0000041440 0.0003639662 -0.0006455291 0.0004962688 0.0003775210 -0.0004898806 0.0045482516 -0.0020617011 -0.0042023524 -0.0031425217 0.0015876020 0.0087577713 0.0028809124 0.0061901680 0.0040580709 -0.0022781900 -0.0083628703 -0.0075638720 -0.0048311878 -0.0114528703 -0.0089292315 0.0011281344 -0.0065002863 -0.0117661212 0.0044954813 0.0129440378 0.0107214304 -0.0002095307 0.0072719017 0.0121263247 0.0065325490 0.0114483946 0.0071827601 -0.0075273152 -0.0022554757 0.0117053984 -0.0082511647 -0.0163571495 -0.0070217011 -0.0005245829 0.0016513258 0.0018949399 0.0000660063 -0.0008438681 -0.0008740996 -0.0013595451 0.0003343115 0.0001431645 0.0017136075 0.0015877088 0.0022067101 -0.0013947869 -0.0012671530 -0.0014776507 -0.0002250323 -0.0009259370 -0.0029955279 -0.0017999136 -0.0021250396 -0.0034964335 -0.0000640290 0.0007995950 0.0028609354 0.0017601005 0.0020725997 0.0035003486 -0.0019694641 -0.0016565582 0.0010623249 0.0024339895 0.0022683492 0.0039465993 0.0031441449 -0.0001208691 -0.0010247682 -0.0021803441 -0.0022195157 -0.0036442570 0.0022766230 0.0001363072 -0.0020959648 0.0004973095 0.0002889525 -0.0022413098 -0.0150774349 -0.0178899672 0.0122212317 0.0270307529 -0.0139997658 0.0130024362 -0.0008841618 0.0004842984 0.0014136611 0.0006801034 -0.0013690278 -0.0021433826 0.0002348893 0.0008576172 0.0006919263 -0.0000471197 -0.0001461600 0.0000012528 0.0000719048 0.0000372185 0.0000305184 0.0000897044 0.0001693648 -0.0001559710 0.0000108329 0.0000263120 0.0000061744 -0.0001835821 0.0001101889 0.0002367037 0.0000288146 -0.0000541758 -0.0000687736 -0.0001808141 -0.0004065052 -0.0001035529 -0.0007645711 0.0000939400 -0.0002589694 0.0000003268 0.0001862576 -0.0000558400 -0.0006782008 -0.0019880967 0.0014306027 0.0010419413 -0.0006834678 -0.0003063943 -0.0011966544 0.0004585555 0.0010960013 -0.0000599685 -0.0000029519 0.0000521003 0.0000137786 -0.0000679376 -0.0000535780 0.0001092682 -0.0001275627 -0.0000645250 -0.0000806744 -0.0002652849 -0.0004294968 -0.0001503847 -0.0006643582 -0.0001044865 -0.0001020568 0.0000345050 0.0005846772 -0.2219673885 -0.0461232943 0.1028153752 0.2660570901 0.1078390687 -0.0219179662 -0.2484440266 -0.0240056445 0.1551195510 0.1219128206 0.0107703041 -0.0749976315 -0.2332077771 -0.0928535375 0.0262791812 0.2660304322 0.0334044107 -0.1699701643 -0.2253230383 -0.1780336786 -0.1523288480 0.1902072274 -0.0482601092 -0.2286984003 0.0251069886 0.0057891702 -0.0275044926 0.1574740649 0.1462215878 0.1426324101 -0.2452740301 0.0403578666 0.2782173263 -0.0275412223 0.0203338126 -0.0003737793 0.0276922599 -0.0118512789 0.0165681422 -0.0124793467 0.0047151222 -0.0081089944 0.0228428377 -0.0164725744 0.0014502080 -0.0297464094 0.0131272556 -0.0194220876 0.0203954462 -0.0257474690 -0.0218016976 -0.0215238098 0.0022749871 -0.0253062653 -0.0042044250 0.0011130921 -0.0062889007 -0.0119503712 0.0176186621 0.0183259777 0.0295699607 -0.0063870288 0.0305324768 -0.0129089855 0.0005126001 0.0332487794 -0.0083868116 -0.0039230214 -0.0069592546 0.0027482982 -0.0002195862 0.0057118156 0.0005197270 -0.0003846840 -0.0001480278 -0.0006063906 0.0079729513 0.0026799696 0.0154721400 0.0072131359 -0.0091112029 0.0879358309 0.0048720393 -0.0488752576 -0.0764816140 -0.0290346648 0.0408840163 -0.0762205689 0.0526606779 0.0472586133 0.0246871115 0.1116875422 -0.0038403992 -0.0687277482 0.0356975001 0.0448425761 0.0510900264 -0.0449187619 -0.0344863297 0.0781654957 0.0064578661 -0.0489399444 0.0215104286 0.1055980375 -0.0045301201 -0.0063709587 -0.0046407007 -0.0038924453 0.0063242123 0.0086029628 0.0032947503 0.0298054161 0.0069540634 0.0173054251 -0.0252078503 -0.0145861246 -0.0135975744 -0.0308701145 0.0161248384 -0.0222675674 0.0076779291 0.0414599639 0.0007967067 -0.0272641110 0.0078786784 -0.0155826704 0.0202011059 -0.0120184012 0.0121463129 0.0285179850 0.0048591228 0.0148879876 0.0064913684 0.0346956638 0.0012618994 0.0000113523 0.0000411982 -0.0002845944 0.0006686563 -0.0004448730 0.0007502664 0.0000377160 0.0002046009 0.0001561066 -0.0005462344 -0.0009087491 0.0001317492 0.0003056742 0.0000789120 -0.0002531527 -0.0000112301 -0.0003037240 -0.0002506069 -0.0010278821 -0.0007442122 0.0008084278 -0.0000021378 0.0002521143 -0.0001697913 -0.0184028713 0.0045627802 0.0086145946 -0.0213842384 -0.0008619494 0.0085845006 0.0123274251 -0.0070427307 -0.0062886117 0.0032963356 -0.0037733725 0.0022372523 0.0042358440 -0.0008698578 -0.0036458894 0.0782760205 -0.0502819365 0.0411579969 -0.0588661606 0.0384032103 -0.0302132396 0.1243684705 0.0133611975 0.0570474775 -0.1655216371 0.0199279415 -0.0745567869 -0.1447007749 0.0577054336 -0.0550030818 -0.0104408039 0.0023910233 -0.0055886639 -0.0023411097 0.0014074657 0.0001422495 -0.0002283917 -0.0009291661 0.0012698820 0.0000107717 0.0000939714 -0.0004323722 0.0006307146 0.0009208354 -0.0002676809 0.0071725198 -0.0070616446 -0.0103022004 0.0008123440 0.0018948428 0.0018217966 -0.0008386209 0.0005969370 0.0022958703 0.0016903044 -0.0015447696 -0.0040093032 -0.0004202676 -0.0024987885 -0.0030723104 0.0013357176 -0.0019218876 -0.0051386760 0.0004970704 0.0034391615 0.0039360327 -0.0014779101 0.0016816204 0.0054174686 0.0025042430 0.0024841155 0.0005092486 -0.0025951256 0.0003009393 0.0050374489 -0.0032506421 -0.0059035794 -0.0011190704 -0.0017068949 0.0013877649 0.0021863436 0.0008941729 -0.0004199109 -0.0006405457 -0.0010756117 0.0012999147 0.0022786192 -0.0005742587 -0.0014173213 -0.0036733854 0.0004389906 0.0009613015 0.0026161719 -0.0010554779 0.0007265292 0.0057249629 0.0017321582 0.0026425488 0.0055091787 0.0009332535 -0.0006983942 -0.0055536920 -0.0015699859 -0.0023742023 -0.0052436019 0.0040459376 0.0012509844 -0.0052244992 -0.0034659320 -0.0037142485 -0.0041179950 -0.0033348176 -0.0016518301 0.0045526828 0.0037239089 0.0033763161 0.0038568075 -0.0004359020 0.0004351396 0.0032663990 0.0003854492 0.0004397408 -0.0009293260 -0.0067964672 -0.0107169890 0.0054854991 0.2077642421 -0.1132665477 0.0926747713 0.0000637738 -0.0000850229 0.0001168265 -0.0005472297 -0.0007436671 -0.0004628355 0.0002409352 0.0005453208 0.0003655218 -0.0002801411 -0.0001890260 -0.0001035096 0.0000958909 -0.0003654205 0.0003165038 0.0001531878 0.0001041402 -0.0003364615 0.0001805266 -0.0000326554 -0.0000054159 0.0003103458 0.0001551051 -0.0000671367 -0.0000054484 0.0000185944 0.0000325655 0.0016496858 0.0038016391 -0.0002560886 -0.0002528989 -0.0000032126 -0.0043932925 -0.0011471951 0.0016354991 0.0016616240 -0.0007098832 -0.0020789410 0.0016773364 0.0017193154 0.0006375576 0.0000737381 -0.0008748605 0.0002871406 0.0035144904 -0.0008729997 0.0000429210 0.0005433250 0.0002238553 0.0002335522 -0.0003632619 0.0000255849 0.0003712243 0.0002523956 -0.0005595360 -0.0002427683 -0.0003591870 -0.0001368268 -0.0006187268 -0.0000243991 -0.0003682538 0.0004125210 0.0005521504 0.0368956192 0.0083346240 -0.0161802963 -0.0460696414 -0.0189648161 0.0033569536 0.0426543038 0.0043650584 -0.0261417081 -0.0215517865 -0.0025277633 0.0121122202 0.0407577901 0.0165139756 -0.0040765646 -0.0457473000 -0.0060282869 0.0286252849 0.0397568455 0.0309324104 0.0259570250 -0.0320851661 0.0084178759 0.0394582902 -0.0035648457 -0.0009844605 0.0032162305 -0.0277209095 -0.0256574805 -0.0242898275 0.0420522308 -0.0073792790 -0.0483828277 -0.2277434398 0.1710111939 0.0007744613 0.2270432926 -0.0988277888 0.1322484649 -0.1063334586 0.0448138618 -0.0600929518 0.1929781882 -0.1415632260 0.0075894063 -0.2440377700 0.1102819617 -0.1537731442 0.1734100107 -0.2153443486 -0.1773564347 -0.1732275523 0.0166572329 -0.2097151022 -0.0281106740 0.0090358250 -0.0371665603 -0.1040777638 0.1514222381 0.1507789143 0.2421523688 -0.0489972800 0.2567762942 0.0017511506 -0.0000660030 -0.0046081673 0.0014181811 0.0007195843 0.0013824154 0.0177665123 -0.0014052331 0.0373871635 0.0045912248 -0.0043239268 -0.0039993209 -0.0040605485 0.0090896873 0.0029122010 -0.0002219775 -0.0098411540 -0.0012818422 0.0013512658 -0.0036226817 -0.0011577989 0.0009382536 0.0049719502 -0.0000128437 -0.0024852831 -0.0027085299 0.0007654416 -0.0033849981 0.0004293059 0.0019769221 -0.0053032838 0.0062864516 0.0039896180 0.0038271003 -0.0097105658 -0.0031888091 0.0098800126 0.0037310328 -0.0068114342 -0.0009099053 0.0106714946 0.0014975708 -0.0177366736 0.0164939390 -0.0120923811 0.0065948770 0.0058687085 0.0051190602 0.0924497405 0.0120179934 0.0539612021 -0.0748568026 -0.0289714872 -0.0413882407 -0.0902697125 0.0375085279 -0.0605999133 0.0143226866 0.1267942030 -0.0032178984 -0.0999431164 0.0414248347 -0.0577154537 0.0768351721 -0.0649203897 0.0473396883 0.1091866955 0.0304200610 0.0576112342 0.0138373908 0.1378689400 -0.0015922061 0.0000071675 0.0000424956 -0.0000722968 -0.0000364283 -0.0000027829 0.0000097006 -0.0004077516 0.0000966749 0.0002195764 0.0001192742 -0.0003053987 0.0005096157 0.0001381669 0.0001015278 -0.0002219580 -0.0013851942 0.0005960009 0.0009006118 0.0003208278 -0.0003913562 -0.0001206275 -0.0004216032 -0.0013029929 0.0018150825 0.0008848626 0.0017992073 0.0000319073 0.0001151681 -0.0008012843 0.0004311816 0.0001105055 -0.0005934410 -0.0002691718 -0.0006954351 -0.0001670823 0.0003820288 0.0016427384 -0.0014032062 -0.0008937292 0.0028454366 0.0001334061 0.0014688014 -0.0011804825 0.0008608557 -0.0006631828 0.0013014171 0.0004366779 0.0006698808 -0.0015943223 -0.0010006854 -0.0009050557 -0.0010175788 0.0009931124 -0.0005664372 -0.0019089608 -0.0005750832 0.0001447295 -0.0012764486 0.0010987468 -0.0001163342 0.0012066137 -0.0014280387 -0.0010617883 -0.0017629541 0.0010098859 0.0014757725 0.0000949710 -0.0019499463 -0.0011554879 -0.2026894844 0.1796743618 0.3161431829 0.0148876603 -0.0202730612 -0.0614687000 -0.0123394683 -0.0394567417 -0.0369434594 -0.0071275829 0.0538481173 0.0702278006 0.0323236258 0.0847521367 0.0712676365 -0.0149951275 0.0493140793 0.0994465745 -0.0242615865 -0.0907689479 -0.0864210050 -0.0017728727 -0.0648210025 -0.0987262488 -0.0557070305 -0.0915306411 -0.0504852651 0.0633223068 0.0079676994 -0.0999590776 0.0716180640 0.1381124688 0.0445444154 0.0442288901 -0.0436448809 -0.0612367930 -0.0327078424 0.0438591663 0.0794269908 0.0875475786 -0.0565063092 -0.0893027294 -0.0047513513 -0.0535146018 -0.1899469462 0.0064435957 0.0303259961 0.1059458971 -0.0552534059 0.0212205878 0.2400076899 0.0679717717 0.1070970752 0.2320567295 0.0417445170 -0.0276813437 -0.2287265726 -0.0540800963 -0.0871430368 -0.2034627942 0.1621475332 0.0486350362 -0.2376767843 -0.1691120175 -0.1756828457 -0.2070870984 -0.1403808478 -0.0550547997 0.1847688325 0.1449595491 0.1344080065 0.1358484123 -0.0071189878 0.0251381291 0.1272734541 0.0013992995 0.0038258919 0.0148157482 0.1195250544 0.1526306102 -0.0791053915 -0.0009407776 0.0014493709 0.0006682722 -0.0240261975 0.0098444244 0.0373592459 0.0270208391 -0.0269112817 -0.0463052260 0.0021243407 0.0133730997 0.0120883601 -0.0001331184 -0.0002977067 0.0000820783 0.0001002323 -0.0000500271 0.0000526628 0.0002026262 -0.0006320476 0.0007196746 -0.0000266691 -0.0004341919 -0.0000239148 -0.0075885635 0.0008218813 0.0056742764 -0.0006828607 -0.0013556918 -0.0004147274 -0.0019557210 -0.0031198253 -0.0008317088 -0.0010995673 -0.0003556236 0.0036959270 0.0010637905 -0.0011578942 -0.0019347077 0.0001497202 0.0047779841 -0.0079190482 -0.0051801179 0.0012573109 0.0009375582 -0.0003023255 -0.0005014740 -0.0030991148 0.0005631743 -0.0003290768 -0.0011467432 0.0000735745 0.0009513841 -0.0002921230 0.0003124738 0.0001646813 0.0004146131 -0.0012641190 -0.0030582011 -0.0092327862 0.0058033125 -0.0090325237 -0.0064668754 -0.0041719813 0.0018146726 0.0011608985 -0.0068856426 -0.0032556966 0.0006996593 0.0105019221 0.0052601499 0.0003152310 -0.0086735381 -0.0019676209 0.0029641169 0.0056139404 0.0034198847 0.0025847517 -0.0100138725 -0.0054427842 -0.0015096402 0.0087071260 0.0020129145 -0.0039911744 -0.0097521820 -0.0090716692 -0.0035648126 0.0045251882 -0.0041645746 -0.0083196255 -0.0009710945 -0.0013851539 -0.0061047971 0.0080316422 0.0064371664 0.0029908626 -0.0056014088 0.0018021042 0.0094778940 0.0021224123 -0.0019727091 -0.0005677654 -0.0016871764 0.0010873230 -0.0002408962 0.0010789204 -0.0012912263 -0.0011024131 -0.0021617670 0.0020075110 0.0007371523 0.0017818857 -0.0012032520 0.0004575539 -0.0019862170 0.0026451299 0.0010377170 0.0008689925 0.0005903364 0.0019113172 -0.0001769251 0.0003190939 0.0006366120 0.0017903128 -0.0021427151 -0.0009334921 -0.0012319693 0.0000279230 -0.0025237090 -0.0006679183 0.0001770453 0.0030374148 0.0012739665 0.0005584563 0.0018445808 -0.0000075347 -0.0000545719 -0.0002346789 0.0001102383 -0.0001388832 -0.0001882077 0.0012917404 0.0001439306 -0.0006804097 -0.0011856417 -0.0004793117 0.0006352430 -0.0028277464 -0.0001617821 0.0015683259 0.0022630867 0.0009295570 -0.0012077149 0.0028033216 -0.0018164195 -0.0016674267 -0.0007949382 -0.0034031670 0.0001631732 0.0021855130 -0.0009291136 -0.0014030337 -0.0015246917 0.0012095470 0.0010122741 -0.0023501841 0.0000794748 0.0015161529 -0.0007057162 -0.0028443839 0.0002114206 -0.0011880769 0.0006689093 -0.0007388500 0.0013362269 -0.0001841554 0.0007350084 0.0032955637 0.0003863705 0.0019162405 -0.0026025063 -0.0011166528 -0.0014320496 -0.0031034347 0.0012140286 -0.0019612757 0.0004631191 0.0041836055 -0.0000761902 -0.0034785131 0.0012828907 -0.0020035643 0.0024674005 -0.0019578316 0.0015122128 0.0040477715 0.0008882353 0.0021462357 0.0005478700 0.0044102121 0.0000248795 0.0008461910 0.0017938331 -0.0040117968 0.0099867894 -0.0014412970 0.0126748321 0.0025376047 -0.0182308896 -0.0231220493 -0.0211494866 -0.0037716842 -0.0248069069 0.0005861835 0.0019823391 -0.0039684558 0.0248986686 -0.0095060329 -0.0185127704 -0.0036588487 -0.0206572068 0.0121103494 0.0251623068 0.0273103085 -0.0097378839 0.0035607319 -0.0011820534 -0.0021124673 0.0022259018 0.0006604567 -0.0010777750 -0.0020202448 0.0013154257 0.0011018435 0.0012249570 0.0001934572 -0.0005239337 -0.0013309909 -0.0007159563 0.0006563891 0.0013095153 -0.0000526349 0.0006341554 -0.0005474985 0.0003526464 -0.0002018365 0.0006283994 0.0002682473 0.0002660205 -0.0016615514 0.0001129675 -0.0007030009 -0.0004134898 0.0005405516 0.0000178001 -0.0003257693 -0.0002247485 -0.0003782663 -0.0003574026 0.0003291888 -0.0003699673 0.0008916425 0.0017640725 0.0013233058 0.0006890962 -0.0013571432 -0.0011630615 -0.0013464709 -0.0011720460 -0.0033168259 0.2101094858 -0.2496081580 -0.3407896759 0.1370078477 0.0468644604 -0.1725032601 -0.1380959244 -0.1647259725 -0.0061364896 0.1538138103 0.1733989168 0.0176455314 0.1344873776 0.2451150163 0.1332890966 0.0333126228 0.1109449582 0.1018634422 -0.1078013270 -0.2236063690 -0.1347567749 -0.1025907107 -0.1841445568 -0.1066708614 -0.0962263074 -0.2444842470 -0.2094974668 0.1208889000 0.0789898507 -0.0943011833 0.1012306365 0.2421807284 0.1590170317 -0.0857810512 0.0289720298 0.0608124837 0.0633439672 -0.0371245395 -0.0770777003 -0.0457680472 0.0433702252 0.1207544773 -0.0213655975 0.0096062142 0.0782216517 0.0110744531 0.0000125645 -0.0321124589 0.0280379556 0.0001192087 -0.0771158427 -0.0133935294 -0.0277942145 -0.0696685406 -0.0185478500 0.0045817197 0.0717228371 0.0070054679 0.0175574114 0.0540743009 -0.0449719465 -0.0061049661 0.0841365347 0.0578251081 0.0674514840 0.0664397827 0.0393633691 0.0127680398 -0.0615573446 -0.0400627792 -0.0339060605 -0.0229002708 -0.0095731106 -0.0141228364 -0.0335026263 0.0227737990 0.0265089593 0.0199999014 0.0533094433 0.1213994415 -0.0776848063 0.0027562993 -0.0019454818 0.0004358079 0.0093532164 -0.0046756931 -0.0140166355 -0.0114672025 0.0101142774 0.0173291505 -0.0004592453 -0.0047773149 -0.0042720303 -0.0001081138 0.0001031512 0.0000203382 0.0000482695 -0.0000206149 -0.0000086461 -0.0000118591 0.0002154208 -0.0002468834 0.0001133600 0.0001575609 -0.0000292559 0.0032851289 -0.0000650489 -0.0023364412 0.0003447860 0.0006220332 0.0001541696 0.0004766398 0.0014190627 -0.0001697585 0.0004981580 0.0001110973 -0.0014819590 -0.0003675985 0.0002771906 0.0007703183 0.0002423254 -0.0014474157 0.0024083817 0.0013717855 -0.0004133748 -0.0002862650 0.0002801867 0.0001668828 0.0010467724 -0.0003195793 0.0001240001 0.0005017539 0.0000335473 -0.0004838568 0.0000443564 -0.0002208434 -0.0000819140 -0.0001848141 -0.0004561189 0.0007838588 0.0031048818 -0.0026237629 0.0025288606 0.0027271710 0.0014043127 -0.0002646176 0.0001327693 -0.0060434526 0.0022331168 0.0088249160 0.0046818258 -0.0001274560 -0.0036084507 -0.0082406869 0.0022864255 0.0107824393 0.0025584925 -0.0064826448 -0.0146385518 -0.0041578694 0.0014510724 0.0059833183 0.0097577862 -0.0006698579 -0.0095399266 -0.0011539356 -0.0040637444 -0.0054497728 0.0126364124 0.0028285287 -0.0063574719 0.0028346066 0.0038121818 0.0184964405 -0.0019321582 0.0030219801 0.0085236603 -0.0141519217 -0.0010418276 0.0109882075 -0.0033354039 0.0027596345 0.0004449665 0.0028192331 -0.0015597875 0.0009913103 -0.0014034344 0.0013125305 0.0006641260 0.0030051869 -0.0026039589 -0.0005680210 -0.0032624231 0.0017186583 -0.0015134350 0.0031227249 -0.0035232185 -0.0022889953 -0.0017255532 -0.0003416835 -0.0030458399 -0.0006323748 -0.0001020063 -0.0018541316 -0.0025187779 0.0035573784 0.0018417294 0.0036008555 0.0001896262 0.0037285559 0.0017436630 -0.0005114954 -0.0081430335 -0.0041278215 -0.0022269874 -0.0060192070 0.0004972220 -0.0000193778 0.0011611966 0.0000010882 0.0000782784 0.0002794172 -0.0000031121 -0.0000795548 0.0000506847 0.0002217160 0.0002964588 -0.0001098697 0.0015504052 0.0001214527 -0.0008619147 -0.0013289014 -0.0005725785 0.0007026206 -0.0013907839 0.0009196507 0.0008337005 0.0004133159 0.0017980158 -0.0000609000 -0.0010732236 0.0005279307 0.0006834910 0.0007995568 -0.0005878055 -0.0005383347 0.0013566271 0.0000300721 -0.0007173324 0.0004245447 0.0015670781 -0.0000765133 -0.0012788574 0.0003496000 -0.0007625945 0.0014844811 0.0000075337 0.0007938722 0.0028536281 0.0003459974 0.0016650535 -0.0021993153 -0.0010269368 -0.0012015899 -0.0029033193 0.0010864859 -0.0019474547 0.0003868876 0.0034215630 -0.0000718139 -0.0029205465 0.0009290310 -0.0016735456 0.0019796761 -0.0014444602 0.0012085898 0.0033745553 0.0005483760 0.0017842247 0.0005498402 0.0033804261 0.0000786705 0.0000238889 -0.0003635416 0.0012064003 -0.0039808876 -0.0001625596 -0.0066828580 -0.0048494960 0.0093807018 0.0128013133 0.0085158464 -0.0032578427 0.0135892529 -0.0012434427 0.0008351276 0.0005142708 -0.0191294965 0.0130077238 0.0161204213 0.0074832253 0.0071819959 -0.0078579716 -0.0110152772 -0.0292263352 0.0237284032 -0.0945451830 0.0348234934 0.0481071631 -0.1982921392 0.0302080771 0.0908427031 0.1476008392 -0.0399110212 -0.0755266845 -0.0890161191 0.0029531622 0.0514867059 0.0704142570 0.0294387069 -0.0310074366 0.0524166613 -0.0474207205 0.0275537851 -0.0747508239 0.0245623411 -0.0466551552 0.1423514924 -0.0087328406 0.0683397137 -0.0965702145 -0.0011939608 -0.0444393854 -0.1844133842 0.0344043709 -0.0793798733 -0.0013306854 0.0035697269 -0.0020847174 -0.0023895231 -0.0033343717 0.0024161479 -0.0035686265 0.0005732963 -0.0002411667 0.0019993325 -0.0018457965 -0.0011002827 0.0022853035 0.0015604044 0.0014241575 -0.0027185219 0.0025647698 0.0084921619 0.0014991097 0.0004930894 -0.0019157779 -0.0015064311 -0.0017595997 -0.0000390114 0.0014246600 0.0018359179 0.0001173219 0.0016325750 0.0028903244 0.0014824490 0.0003057043 0.0010943299 0.0010758731 -0.0009067982 -0.0020702454 -0.0013484776 -0.0019099929 -0.0027407828 -0.0007728687 -0.0012320791 -0.0032633472 -0.0027801582 0.0013177018 0.0006342402 -0.0012662329 0.0005136904 0.0021122107 0.0009850790 0.0000787030 -0.0009022658 -0.0011613645 -0.0003850141 0.0008129453 0.0014555796 0.0023258035 -0.0014187345 -0.0023801045 0.0000957266 -0.0005475389 -0.0024312599 -0.0001302551 0.0002295483 0.0012087288 -0.0006227806 0.0002260059 0.0026758751 0.0006311581 0.0011531771 0.0030117046 0.0006004004 -0.0003171306 -0.0029124553 -0.0004710918 -0.0008388456 -0.0021674574 0.0014978746 0.0007308665 -0.0023565228 -0.0030003489 -0.0024074964 -0.0041280637 -0.0022643322 -0.0006310666 0.0034072540 0.0017054574 0.0011195091 0.0014109781 -0.0000630014 0.0002038211 0.0015060446 0.0004944342 0.0005607771 -0.0003777199 0.0006899614 0.0010994084 0.0027406416 0.0238733607 -0.0076877287 0.0151158536 0.0002263731 -0.0002199615 -0.0002571196 -0.0003821773 0.0001365976 0.0004560783 0.0000243252 -0.0000741047 -0.0000824443 -0.0001351766 -0.0000336792 -0.0000671986 0.0000419392 -0.0002369970 0.0001791137 0.0000218038 -0.0001057600 0.0000983064 0.0000978024 -0.0000303221 0.0000056753 0.0002131126 0.0000271568 -0.0001199123 -0.0000414031 0.0000358778 0.0000694760 0.0009311168 0.0022668787 -0.0001111681 0.0000558130 0.0000022538 -0.0022465452 -0.0006018703 0.0009364343 0.0008525097 -0.0000825456 0.0009671002 -0.0024821773 -0.0008177043 0.0017258956 0.0006762640 0.0009535133 -0.0002977178 0.0012939766 -0.0003661828 -0.0000047001 0.0003466976 0.0001728928 0.0000823578 -0.0002842896 0.0000183814 0.0003002772 0.0002009011 -0.0001542845 0.0000100756 -0.0001379184 0.0000728075 -0.0001418907 -0.0000158227 -0.0001109286 0.0000968355 0.0000241399 0.0209062361 -0.0027116467 -0.0165354016 -0.0050973557 0.0014063364 0.0035659219 0.0044239007 -0.0006193742 -0.0053577104 0.0008007096 0.0031426223 0.0051833278 -0.0033447343 -0.0026262996 -0.0025859106 -0.0022914235 0.0024416217 0.0068280210 0.0107167463 0.0019118150 0.0108484296 -0.0061402219 -0.0006728187 0.0045234830 0.0012010062 0.0019427062 0.0144651901 0.0038175225 0.0011967491 -0.0005918434 0.0076018880 0.0008755106 0.0013178361 -0.0090145587 0.0038929838 -0.0021317098 0.0071522217 -0.0027723743 0.0055589102 -0.0014987634 -0.0008140664 -0.0037501182 0.0010710376 -0.0001583556 0.0019198011 -0.0067006620 0.0010718797 -0.0084825951 0.0124818727 -0.0074557352 -0.0125279948 -0.0060778294 0.0015320296 -0.0066608910 -0.0011424703 -0.0032246312 -0.0156848343 0.0007820502 0.0007429494 0.0020460003 0.0104567642 -0.0029775953 0.0031496778 0.0021880057 -0.0002809610 -0.0077586381 -0.0035136924 -0.0014409826 -0.0045132692 0.0031943019 0.0000831828 0.0081751106 -0.0025231398 0.0027738093 0.0049544727 -0.1716448989 0.0478677826 0.0964511057 0.1412999740 -0.0385581863 -0.0869339413 0.1925780661 -0.0205367830 -0.1105870557 -0.1298109467 -0.0297031561 0.0716301599 -0.2050309342 0.0858861136 0.1193276470 0.0186137379 0.1847081248 0.0060021079 -0.1759628561 0.0835098262 0.1137924242 0.1063232674 -0.1135228499 -0.0735175870 0.2224159404 -0.0064005528 -0.1424706801 0.0440253912 0.1989609008 -0.0105662825 0.1325797477 -0.0077963257 0.0782212194 -0.1631946008 0.0090358970 -0.0863551609 -0.1783183255 -0.0197823308 -0.1041437204 0.1266493963 0.0672118142 0.0685480562 0.2000516541 -0.0639409835 0.1303923255 -0.0202355990 -0.1866905680 0.0053245242 0.1729291199 -0.0397574280 0.0984113719 -0.1040825880 0.0636973150 -0.0628816719 -0.2021891775 -0.0119464930 -0.1066157573 -0.0377034586 -0.1649506033 -0.0095991586 0.0000166462 0.0000341749 0.0000119441 -0.0001297659 0.0001234714 -0.0001146601 -0.0002137882 -0.0000857532 -0.0000773892 0.0000563376 0.0000361994 0.0000350191 0.0000604850 -0.0000236837 0.0001051362 0.0009076202 0.0002970814 0.0000377001 -0.0015563927 0.0014317651 0.0001304174 -0.0014736657 -0.0006896936 -0.0016420839 0.1033930456 -0.0410243108 -0.0545090652 0.1980643942 -0.0274913305 -0.0886005467 -0.1536141351 0.0427781747 0.0788693839 0.1267593934 -0.0106488302 -0.0536293242 -0.0885924531 -0.0261413409 0.0369485547 0.0841767513 -0.0613777293 0.0403234335 -0.1319609920 0.0386579878 -0.0583865734 0.1782721666 -0.0097295173 0.0857247982 -0.1278342424 -0.0042936524 -0.0605120340 -0.2196398073 0.0439454110 -0.0924685298 -0.0024287067 0.0051916077 -0.0041561128 0.0031698912 0.0039662906 -0.0037703245 -0.0007125741 -0.0028251809 0.0040893114 0.0002052815 0.0004122717 -0.0011671114 0.0003711223 0.0006956082 -0.0011869648 0.0011573384 -0.0006415847 -0.0011485878 0.0010592935 0.0007652897 -0.0008220048 -0.0010351937 -0.0009449136 0.0003880136 0.0010706780 0.0007710872 -0.0005042677 0.0007971396 0.0010716824 0.0002439721 0.0005078064 0.0003811993 -0.0003205173 -0.0006258903 -0.0007925280 -0.0001431018 -0.0010046331 -0.0009203291 0.0004715228 -0.0002609634 -0.0010314655 -0.0013440856 0.0002688820 0.0006536989 0.0003592196 0.0007324936 0.0010009292 0.0013619523 -0.0004145821 0.0001077538 0.0002664411 0.0001607014 -0.0001502326 -0.0002016094 0.0000152477 -0.0003930465 0.0002228088 0.0002244656 0.0001998149 0.0001436368 -0.0000315346 -0.0000604470 -0.0000364400 -0.0001344241 -0.0001061260 -0.0001066078 -0.0001873269 -0.0002097921 -0.0003395894 0.0000132991 0.0001029961 0.0002548677 0.0001036378 0.0000760434 0.0001920863 0.0002886219 -0.0005024141 -0.0005796589 0.0003868511 0.0000331244 0.0005352161 0.0003343653 -0.0000853835 0.0000382065 -0.0003388711 0.0003419706 -0.0003208142 0.0002139817 0.0001858311 -0.0001195158 0.0004158009 0.0003924759 -0.0001850120 -0.0040716619 -0.0026762659 0.0019472274 0.0326223320 -0.0102428446 0.0200417781 0.0000949907 -0.0000579516 -0.0000761945 -0.0000762181 0.0000335563 0.0000771750 0.0000180547 -0.0000060790 0.0000247087 -0.0000817613 -0.0000733736 -0.0000926216 -0.0000058053 -0.0003921376 0.0002776859 -0.0001019755 -0.0001169116 -0.0001718227 0.0000289004 -0.0000199937 0.0000189163 0.0000200987 0.0000050723 -0.0000084398 0.0000080138 -0.0000029051 -0.0000123291 0.0017838767 0.0037259825 0.0001326241 0.0000256084 0.0000467484 -0.0039016193 -0.0010614766 0.0016951335 0.0013728765 0.0001916160 0.0005401709 -0.0003231603 0.0005241187 0.0018809359 0.0005572453 0.0011574173 -0.0004222211 0.0026607672 -0.0003362778 -0.0000561462 0.0004671020 0.0001232793 0.0001067877 -0.0002656774 0.0001377115 0.0003743719 0.0002508838 -0.0000075742 0.0000069937 0.0000495553 -0.0000578137 0.0000418267 0.0000265668 0.0000060135 -0.0000001077 0.0000102689 -0.0245123093 0.0031360320 0.0187755863 0.0082233849 -0.0002518467 -0.0038863947 -0.0068377843 -0.0000793749 0.0061219366 0.0006038176 -0.0019629118 -0.0037920674 0.0014694234 0.0014043201 0.0019865047 0.0041599698 -0.0022984257 -0.0082079055 -0.0144278742 -0.0045254718 -0.0131855284 0.0072053645 -0.0005249084 -0.0071549795 -0.0027889154 -0.0037030963 -0.0238939926 -0.0014266494 -0.0001897847 0.0009165014 -0.0089406936 -0.0008549442 0.0001029884 -0.0136674139 0.0067773007 -0.0023783389 0.0104948960 -0.0047728048 0.0067344471 -0.0026690823 0.0007935077 -0.0020061005 0.0026926840 -0.0018833119 0.0011487452 -0.0095956578 0.0019727699 -0.0111622787 0.0183461092 -0.0124894061 -0.0177366562 -0.0078720576 0.0007673978 -0.0105168157 -0.0009999036 -0.0070371414 -0.0297961801 -0.0013598358 0.0024157416 0.0024960087 0.0134235962 -0.0037693384 0.0047955496 -0.0032813497 0.0005735058 0.0123545181 0.0058669807 0.0024981962 0.0076140751 0.0055455671 0.0003439904 0.0148137784 -0.0050153738 0.0055780401 0.0098200598 0.1646628430 -0.0351653540 -0.0917167845 -0.1414728252 0.0295643807 0.0841048607 -0.1685055763 0.0168358971 0.0966703684 0.1120689381 0.0300805205 -0.0613708416 0.1806612374 -0.0761498978 -0.1057596458 -0.0172155040 -0.1559837452 -0.0039049461 0.1522359356 -0.0657006560 -0.0978132732 -0.0884068974 0.0879848383 0.0605866314 -0.1894221011 0.0129835956 0.1282565779 -0.0407553154 -0.1567450315 0.0111712666 0.1544181698 -0.0201065832 0.0890596543 -0.1825513757 0.0226967783 -0.0973319781 -0.1793753118 -0.0126981742 -0.1051257780 0.1215571859 0.0587234139 0.0663050779 0.2029743917 -0.0560581882 0.1421751667 -0.0119024553 -0.1747745661 0.0078748914 0.1784476308 -0.0423365560 0.1016378954 -0.1045041948 0.0697319231 -0.0634333738 -0.2110628363 -0.0128977419 -0.1119521750 -0.0359037391 -0.1648649224 -0.0082524959 -0.0000123996 0.0000029384 -0.0000022685 0.0000257018 -0.0000727012 0.0000054797 0.0000323140 0.0001410336 0.0001033687 0.0000527762 -0.0000540974 0.0001262746 0.0000107342 0.0000032940 -0.0000316524 -0.0000214587 0.0005244800 0.0004290190 -0.0001605329 0.0004084165 -0.0001749204 -0.0003849773 -0.0005903907 0.0002981179 0.0004713494 -0.0032939454 -0.0020743622 -0.0013046550 0.0024736962 -0.0011208596 0.0006816575 0.0016118208 0.0001078508 -0.0026935099 -0.0000443344 0.0001606161 0.0005414505 0.0009850577 0.0001575690 -0.0150164361 0.0032405207 -0.0080404248 0.0151851612 -0.0032751813 0.0072980679 -0.0231072818 -0.0072478292 -0.0124060825 0.0264903217 0.0146781264 0.0206429999 0.0174429432 -0.0156968285 0.0160036826 0.0008805328 -0.0005496790 0.0011388977 -0.0000207311 0.0000536125 0.0001003259 0.0007328718 -0.0003424259 -0.0009097642 -0.0009172117 0.0010651686 0.0008897631 -0.0002178568 -0.0000713173 0.0003376213 -0.0084428323 0.0094120250 0.0124920077 -0.0036989659 -0.0023652578 0.0025772309 0.0035948120 0.0033313595 -0.0012962939 -0.0043631419 -0.0024623379 0.0023283373 -0.0027479809 -0.0040462160 -0.0011935542 -0.0019142562 -0.0014668546 0.0012963518 0.0026838791 0.0030122214 0.0003978197 0.0037155866 0.0038412203 -0.0007632950 0.0006316582 0.0040787634 0.0041305143 -0.0008324426 -0.0025793340 -0.0023629443 -0.0056033489 -0.0032149696 -0.0074440725 0.0040323907 -0.0022800547 -0.0033702497 -0.0032619651 0.0028293530 0.0030019414 0.0017943106 -0.0011039284 -0.0033632810 -0.0010689225 -0.0016425205 -0.0021845107 -0.0000698058 0.0003544456 0.0005110522 0.0004916759 0.0005294768 0.0014495065 0.0014170635 0.0017769726 0.0025189355 -0.0000180279 -0.0003602554 -0.0019121738 -0.0006025906 -0.0005304519 -0.0014717580 -0.0013135243 0.0033349037 0.0021261909 -0.0014619995 -0.0039564545 -0.0044959768 -0.0004290389 -0.0024716117 0.0009839076 0.0023223736 -0.0019214750 0.0019464661 -0.0007137396 -0.0014866532 0.0011467181 -0.0011238413 -0.0013626103 0.0001514719 0.0029428967 0.0038016244 -0.0019595591 -0.0145056892 -0.0576581524 -0.1208394295 -0.0015001003 0.0009731306 0.0034276127 0.0010947577 -0.0046750560 -0.0060382920 0.0011755110 0.0031578789 0.0029576030 -0.0022104760 -0.0022233161 -0.0021475208 0.0009013155 -0.0078843701 0.0062455074 -0.0008096923 -0.0017570776 -0.0038441605 0.0009722034 -0.0003483728 0.0004951195 -0.0002591498 0.0004549806 0.0006804777 0.0001706874 -0.0001075464 -0.0001819012 0.0331293948 0.0723289138 0.0002879807 -0.0078720920 0.0020698469 -0.0822447790 -0.0206466848 0.0371433236 0.0258757215 -0.0021336889 0.0003231627 -0.0047740851 0.0120642639 0.0375700594 0.0110902410 0.0164709975 -0.0052003763 0.0601988560 -0.0085847110 -0.0006645824 0.0090631945 0.0029515425 0.0026541181 -0.0061674871 0.0025210529 0.0070094663 0.0050212670 -0.0021333601 -0.0013221139 -0.0022730565 -0.0005605058 -0.0029144952 -0.0004080704 -0.0014177995 0.0016396810 0.0021284126 0.0027108216 0.0139908473 0.0212333280 -0.0127621869 -0.0131156027 -0.0121952860 -0.0017876085 0.0119584598 0.0234250983 -0.0059685297 -0.0271082069 -0.0504822791 0.0097320404 0.0159198925 0.0208878300 0.0066723785 -0.0067553306 -0.0168843006 0.0286871974 0.0110182417 -0.0037785060 0.0297724196 0.0161450643 0.0028338825 0.0215000770 0.0270567042 0.1469883934 -0.0312950149 -0.0029741481 0.0166193352 -0.0262953260 -0.0072187696 0.0092990762 -0.0390952272 0.0692087083 0.0718261170 -0.0332405215 -0.0408889893 -0.1269852786 0.0149338421 0.1179022301 0.2670928454 0.0211710540 -0.0742499776 -0.1143784905 0.0493768296 0.0122642361 0.0930754238 0.1209279156 -0.0858106714 0.0139752902 0.1270633444 -0.1132745156 -0.0240640659 0.0038328541 -0.1821509106 -0.6665244461 -0.1415874344 0.0546091252 -0.0816053320 -0.1264482143 0.0729328627 -0.0417723774 0.0168260393 -0.0044025114 -0.0705535925 -0.0344879188 -0.0158385174 -0.0478658072 0.1051469746 0.0136476921 0.3027846584 -0.1097379944 0.1282851719 0.2299748564 -0.0022526020 -0.0014031826 0.0012196343 0.0021082904 0.0015544637 -0.0009301635 0.0026950362 0.0003558398 -0.0014831502 -0.0020327784 -0.0013583900 0.0010208038 -0.0027213545 0.0018400048 0.0017748532 0.0007727612 0.0024679770 -0.0002625794 -0.0014100386 -0.0000212819 0.0008243539 0.0007614520 0.0002235883 -0.0004236977 0.0011006655 -0.0007040753 -0.0009909353 0.0007350284 0.0008777780 -0.0004212938 -0.0115310458 -0.0046338551 -0.0063102570 0.0116796577 0.0042613498 0.0052615117 0.0084350652 0.0014494993 0.0049081063 -0.0053187707 -0.0048348926 -0.0027396903 -0.0108977612 0.0034429155 -0.0076229614 0.0011966716 0.0060636648 0.0001325151 -0.0041542646 -0.0016773495 -0.0022129869 0.0014313421 0.0021707748 0.0007510058 0.0045464581 -0.0027647884 0.0019979250 0.0023621862 0.0007890969 0.0010592993 -0.0002748037 -0.0001148556 -0.0002184897 0.0004015017 0.0003995853 0.0019514620 0.0017885066 -0.0008327159 -0.0025465588 -0.0003078414 0.0017590638 -0.0026539574 -0.0004280322 -0.0002886096 -0.0004261490 0.0060060876 0.0024404603 -0.0003983459 0.0000970557 0.0002378890 -0.0004449750 0.0022545938 0.0028618194 -0.0015465991 -0.0164097567 0.0216894929 0.0176558633 -0.0171324855 -0.0084104612 0.0147188219 0.0169162666 -0.0128599262 -0.0107911172 -0.0148794454 0.0021867502 0.0066849649 0.0137078542 -0.0021237073 -0.0071801441 -0.0064733902 0.0022571895 -0.0032212813 0.0085110320 -0.0023826363 0.0031502836 -0.0093836686 -0.0012823942 -0.0047924500 0.0091006323 0.0034777821 0.0061446487 0.0086508761 -0.0044100655 0.0053295543 0.0006074206 -0.0000256475 0.0006594099 -0.0008501087 -0.0002261907 0.0012014412 -0.0004093200 -0.0007012468 -0.0016619988 -0.0004216626 0.0007439332 0.0009301811 0.0014251154 0.0017943300 0.0017047878 0.0438048632 -0.0405331655 -0.0620013610 0.0138593066 0.0101581612 -0.0090050438 -0.0129893868 -0.0116625438 0.0054734948 0.0161869824 0.0079187842 -0.0095030546 0.0093806380 0.0129384923 0.0030318111 0.0076683643 0.0050459701 -0.0063727198 -0.0104050502 -0.0105161506 -0.0001681292 -0.0122829488 -0.0115883037 0.0039987038 -0.0014889151 -0.0109309758 -0.0138678785 0.0017372736 0.0105280962 0.0116037951 0.0240070841 0.0116949278 0.0310611170 -0.0151014526 0.0090617928 0.0147201814 0.0106862428 -0.0091942701 -0.0156205032 -0.0102931681 -0.0029784503 0.0240498170 0.0027437483 0.0043885051 0.0069680747 0.0014530110 0.0000320682 0.0000011586 -0.0017688017 -0.0013044939 -0.0031942566 -0.0038105205 -0.0042625930 -0.0067426154 -0.0005147686 0.0012704090 0.0051904097 0.0012139763 0.0006559262 0.0033877887 0.0111845659 -0.0150784089 -0.0148498977 0.0038933049 0.0040691982 0.0086455149 0.0019582959 0.0017620806 0.0002305601 -0.0077267637 0.0116141781 -0.0047888118 0.0015841969 0.0038011843 -0.0015919135 0.0034075655 0.0036137493 -0.0010986518 -0.0122440620 -0.0092135949 0.0098526437 -0.0038944023 -0.0122754008 -0.0265806615 -0.0033415717 0.0025828259 0.0062873557 0.0031356578 -0.0066390880 -0.0103706955 0.0012892246 0.0039943946 0.0039029046 -0.0005524575 -0.0006032654 -0.0007182130 0.0002527366 -0.0015915255 0.0015091380 -0.0001352255 -0.0006356408 -0.0006872382 0.0002135172 -0.0001347325 0.0002114835 -0.0012797927 0.0004514793 0.0013992397 0.0003676639 -0.0006351248 -0.0010577035 0.0064021692 0.0140745528 -0.0000075154 -0.0021945476 0.0004657841 -0.0169181112 -0.0039772225 0.0073182392 0.0050706585 -0.0007225009 0.0006951251 -0.0021052588 0.0026875743 0.0096592115 0.0030182008 0.0034430718 -0.0012861727 0.0133353492 -0.0014284287 -0.0002390010 0.0018223472 0.0006284009 0.0001296597 -0.0014273050 -0.0001193367 0.0018042956 0.0013384244 0.0000426028 -0.0005642197 0.0023325100 -0.0028752261 0.0018229757 0.0008389580 -0.0005450328 0.0002952955 0.0019238166 -0.0093143008 -0.0659137090 -0.1018196879 0.0585316001 0.0613052776 0.0576001788 0.0091588010 -0.0559550958 -0.1103062594 0.0275079471 0.1268881562 0.2367424246 -0.0450520147 -0.0742517880 -0.0979231033 -0.0321550699 0.0318313194 0.0801549592 -0.1330020135 -0.0505512216 0.0189086099 -0.1402487987 -0.0749387156 -0.0130097403 -0.1007160091 -0.1272680277 -0.6915046342 0.1465000926 0.0126094144 -0.0778259033 0.1249522814 0.0332415700 -0.0440338685 -0.0082223217 0.0148705631 0.0155890800 -0.0073017063 -0.0087842452 -0.0275234881 0.0032635456 0.0254792558 0.0577959642 0.0044847265 -0.0159622903 -0.0247484770 0.0108732949 0.0026133232 0.0203347265 0.0258999688 -0.0183227185 0.0032826323 0.0276280701 -0.0244467661 -0.0051433920 0.0009164109 -0.0396552940 -0.1449525770 -0.0305835115 0.0114549351 -0.0177003109 -0.0277738700 0.0157132889 -0.0091331193 -0.0793374790 0.0208153728 0.3321152483 0.1621363144 0.0745246388 0.2252122895 0.0228608269 0.0029809375 0.0658396338 -0.0239199886 0.0279329776 0.0500815510 -0.0089770404 0.0070064681 0.0049006118 0.0091703886 -0.0072496494 -0.0059766296 0.0036695336 -0.0025986157 -0.0023079016 -0.0010821753 0.0019570333 0.0008985533 -0.0052445036 -0.0006547565 0.0021545358 -0.0016382969 0.0019664221 0.0008110657 -0.0071391427 0.0037650274 0.0046825773 0.0033211171 -0.0056743727 -0.0024959590 0.0103843604 -0.0004977585 -0.0071677616 0.0008499162 0.0057926037 -0.0001419971 -0.0060671320 0.0001871983 -0.0033639708 0.0063067539 -0.0002340224 0.0032068702 0.0046521140 0.0001143397 0.0027387828 -0.0027542304 -0.0015009456 -0.0014809041 -0.0055821720 0.0011042828 -0.0041664014 0.0001177840 0.0035061964 -0.0003286711 -0.0040049078 0.0004943659 -0.0022466368 0.0020142213 -0.0009860454 0.0012241685 0.0048285885 -0.0003283839 0.0024399898 0.0009930454 0.0028091155 0.0002127619 -0.0001444721 -0.0001176342 -0.0010053408 0.0029680839 -0.0032844436 0.0029799618 0.0019503001 0.0029021335 0.0017477477 -0.0018707197 -0.0039640725 0.0006245877 0.0003942462 0.0000914549 -0.0009012196 0.0014660714 0.0022579869 0.0011565598 -0.0013392911 -0.0000989538 -0.0000571861 0.0013564012 -0.0003641199 0.0013651710 0.0000176091 -0.0000141891 -0.0000074280 0.0000553058 0.0001228127 -0.0000143029 -0.0000109439 -0.0000166078 0.0000009572 0.0000190207 -0.0000084410 -0.0000107002 -0.0000760938 0.0000657290 0.0000638562 -0.0001171255 -0.0000604841 -0.0000495735 0.0000211571 0.0000008229 0.0000143642 -0.0000035798 0.0000210845 -0.0000018688 0.0000029480 0.0000105544 0.0000086673 0.0000098328 -0.0001911788 -0.0000018763 0.0001387670 0.0000057735 -0.0000608633 0.0001483282 -0.0001772928 -0.0000332049 -0.0001682309 0.0003553808 0.0002434487 0.0001412126 -0.0003375390 -0.0001241138 -0.0000659458 -0.0002254964 -0.0001633516 -0.0035423607 -0.0015742163 -0.0013824475 -0.0000083009 0.0000936073 0.0001591184 0.0000154573 0.0000040444 -0.0000183098 -0.0000331613 -0.0000323828 -0.0000047463 -0.0000289510 -0.0000450873 -0.0000184411 -0.0000099005 -0.0000057515 0.0000072234 -0.0000095492 0.0000017102 0.0000060902 0.0000744942 0.0000862957 -0.0000083801 0.0000420021 0.0000494022 0.0000031005 -0.0000095776 -0.0000262409 0.0000041315 0.0000774047 -0.0000023953 -0.0000930492 0.0002306193 0.0001610960 0.0001541123 0.0000512205 -0.0001301160 -0.0000283493 0.0003823451 0.0004395638 0.0001174329 -0.0000680362 -0.0000282952 0.0000233952 -0.0000189262 0.0000040687 0.0000127136 0.0000008148 -0.0000083276 -0.0000331225 0.0003946687 0.0001774186 -0.0003210040 -0.0001913822 -0.0000675960 -0.0000945031 0.0000086972 0.0000070722 0.0000205064 0.0000614310 0.0000374179 0.0000577002 -0.0034846800 -0.0010418668 0.0035418885 0.0020271000 0.0019180781 0.0010017419 -0.0000049411 -0.0000368217 0.0000154388 0.0000054608 -0.0000576013 -0.0001421762 0.0001457252 0.0001830424 0.0005873544 -0.0023291574 -0.0030345821 -0.0085827109 0.0000029134 -0.0000256595 -0.0000134696 -0.0001149527 0.0000736314 0.0000089294 0.0000097012 -0.0001389893 -0.0001934661 0.0000565825 0.0001660218 0.0001186740 0.0009557362 -0.0003392057 -0.0000039064 -0.0002939871 0.0007160450 -0.0003111854 -0.0475305726 -0.0089050603 -0.0183325419 -0.0059174000 0.0048139025 0.0070627433 -0.0000222553 0.0000034701 0.0000220989 -0.0000085817 0.0000269925 0.0000229718 -0.0030431516 0.0012716297 0.0028781138 -0.0006678042 -0.0107196222 -0.0009189227 0.0056898297 0.0019133279 0.0022803217 0.3952313044 -0.3046530615 -0.2780287214 -0.0202150953 -0.1617246909 0.4899203702 0.1693990098 0.5776500431 -0.0021655080 -0.0302865643 -0.1164830952 -0.0248835460 0.0976468739 0.0019147559 0.0435644098 0.0011200668 0.0598659234 -0.0988074314 0.0001915410 -0.0009733346 0.0001458955 -0.0003968243 0.0000790089 -0.0006104143 0.0002727418 0.0002370604 0.0000311192 0.0000070647 0.0000071049 -0.0000046340 -0.0000047287 -0.0000009463 0.0000036799 0.0000024107 -0.0000005973 -0.0000032404 -0.0000101589 -0.0000031991 0.0000008751 0.0000072211 0.0000025816 -0.0000006246 -0.0000122613 -0.0000081984 -0.0000022083 0.0000140405 0.0000098294 -0.0000200729 0.0000005490 -0.0000055178 -0.0000077243 0.0000213063 0.0000030401 -0.0000116431 0.0000101970 -0.0000114866 0.0000037808 0.0000916291 0.0001205952 0.0000362141 0.0000037396 -0.0000078540 0.0000163132 -0.0000357662 -0.0000050880 0.0001091910 0.0000023557 -0.0000609639 0.0000094224 0.0000279582 -0.0000111386 -0.0000079226 -0.0000067201 0.0000270381 0.0000177277 -0.0001159278 -0.0000135954 -0.0004817628 -0.0009701321 -0.0005164761 0.0000114022 -0.0000696452 0.0000386483 0.0000156858 0.0000162735 -0.0000460097 -0.0000218991 0.0000185178 -0.0000897135 -0.0000268939 -0.0000083338 0.0000004313 0.0000091325 -0.0000077622 -0.0000011183 0.0000002916 0.0000136363 0.0000059566 -0.0000086152 -0.0000174593 -0.0000944564 0.0000138402 0.0000025972 -0.0000033719 -0.0000014187 -0.0000053054 0.0000085789 0.0000027854 -0.0000031087 -0.0000066906 0.0000011410 0.0000060312 -0.0000054120 -0.0000041534 0.0000220399 0.0000976102 -0.0000062357 -0.0000346857 0.0000383626 0.0000186244 0.0000029791 -0.0000010302 -0.0000019858 0.0000073031 0.0000033153 -0.0000038056 -0.0000216595 -0.0000219533 0.0000047455 -0.0000740556 -0.0000306343 0.0000389693 -0.0000090624 -0.0000055176 -0.0000054554 0.0000047889 0.0000033716 0.0000027094 0.0000034958 0.0000012796 0.0000019793 0.0000051569 -0.0000052385 0.0000033109 -0.0000119611 0.0000150959 -0.0000079073 -0.0000491448 0.0000466907 -0.0000375646 -0.0000012698 0.0000109674 -0.0000010910 0.0000082469 0.0000031982 0.0000048727 -0.0000103422 -0.0001436541 -0.0000039952 -0.0000450703 -0.0000263082 -0.0000265875 0.0005280009 -0.0001450092 0.0010238178 -0.0062257519 -0.0046483223 0.0025426813 -0.0054352886 0.0111905216 -0.0106579775 0.0054583463 -0.0049642540 -0.0037452012 0.0011866509 0.0016350159 -0.0002656936 0.0039605022 -0.0170582260 0.0173403498 -0.0085437085 -0.0106435084 -0.0185126156 -0.0081559403 0.0091365767 0.0047020137 0.0000041719 -0.0000033504 -0.0000018734 0.0000152465 0.0000394312 -0.0000033536 -0.0000030487 -0.0000048711 0.0000003347 0.0000049028 -0.0000015429 -0.0000030129 -0.0000180393 0.0000152830 0.0000152399 -0.0000272288 -0.0000138701 -0.0000113924 0.0000048625 0.0000003799 0.0000033504 -0.0000009296 0.0000035445 -0.0000010524 0.0000007540 0.0000031186 0.0000021322 -0.0000002433 -0.0000372845 -0.0000013558 0.0000319289 -0.0000001799 -0.0000134977 0.0000347875 -0.0000422652 -0.0000073109 -0.0000379844 0.0000838748 0.0000558630 0.0000374747 -0.0000838957 -0.0000304178 -0.0000177054 -0.0000540953 -0.0000378588 -0.0010734670 -0.0004714837 -0.0004351882 -0.0000042464 0.0000156362 0.0000226662 0.0000032684 0.0000032329 -0.0000043108 -0.0000002343 -0.0000194281 -0.0000054941 -0.0000098489 -0.0000113523 -0.0000028716 -0.0000021718 0.0000016415 0.0000063792 0.0000064263 -0.0000082378 -0.0000004867 0.0000292881 0.0000229588 0.0000023858 0.0000281247 0.0000221169 -0.0000218747 -0.0000111609 -0.0000074915 -0.0000011341 -0.0000248923 0.0000009055 0.0000099636 0.0000586856 0.0000564787 0.0000543742 0.0000315337 -0.0000712649 0.0000016364 0.0002294963 0.0002042372 0.0000408217 -0.0000113772 0.0000009883 0.0000028158 0.0000030169 -0.0000087533 -0.0000142191 -0.0000087667 -0.0000083904 -0.0000108579 0.0000931762 0.0000442254 -0.0000788105 -0.0000435898 -0.0000183133 -0.0000153569 0.0000027179 0.0000004320 0.0000078648 0.0000829118 0.0000551998 0.0000407202 -0.0008544097 -0.0002419694 0.0008379742 0.0004267045 0.0003977185 0.0001962363 0.0000217599 0.0000006454 -0.0000080937 -0.0000202227 0.0000541675 0.0001218925 0.0000286239 0.0000350703 0.0001269783 -0.0005389797 -0.0006292254 -0.0018660396 -0.0000011852 -0.0000037100 -0.0000027169 0.0000069487 0.0000491924 0.0000067015 0.0000978403 0.0000638824 0.0000608165 -0.0000712680 -0.0001728897 -0.0000567212 -0.0005620939 0.0004004198 0.0007386580 -0.0010952162 0.0014555059 -0.0021308222 -0.0098039703 -0.0013877414 -0.0036212035 0.0321441513 -0.0217111992 -0.0327674427 -0.0000517166 0.0000065808 0.0000400106 -0.0000838281 0.0004125629 0.0002928013 -0.0146893086 0.0067402759 0.0110714884 -0.0018993767 -0.0325573661 -0.0020558939 0.0305984263 0.0084272345 0.0135923378 0.0851043507 -0.0644897232 -0.0586723225 -0.0041724709 -0.0327624811 0.0992816239 0.0331075998 0.1139834738 -0.0004665537 0.1408730886 0.5482713103 0.1175043297 -0.4997704651 -0.0092508858 -0.2236255441 -0.0062513788 -0.2901415089 0.4810400982 0.0017520083 -0.0064520898 0.0006808619 -0.0027187055 0.0001781922 -0.0046394793 0.0025154816 0.0020089870 0.0001130687 0.0000018361 0.0000015670 -0.0000010868 -0.0000015072 0.0000000332 0.0000014138 0.0000002717 -0.0000005550 -0.0000012788 -0.0000028832 -0.0000005433 0.0000004531 0.0000017847 0.0000004400 0.0000000406 -0.0000031467 -0.0000020186 -0.0000006575 0.0000052913 0.0000002381 -0.0000117868 0.0000040763 0.0000021119 -0.0000005002 0.0000065559 0.0000010721 -0.0000021801 0.0000022813 -0.0000009127 0.0000003397 0.0000225374 0.0000310536 0.0000107963 0.0000028038 -0.0000024743 0.0000035655 -0.0000081980 -0.0000010179 0.0000210330 -0.0000023798 -0.0000133678 0.0000042744 0.0000046205 -0.0000021265 -0.0000031542 -0.0000001069 0.0000047556 0.0000036107 -0.0000312904 -0.0000078183 -0.0001120250 -0.0001917783 -0.0001108962 -0.0000109238 -0.0000079713 0.0000061362 -0.0000128560 0.0000128881 -0.0000032303 0.0000200521 -0.0000024095 -0.0000086810 0.0000023883 -0.0000025084 0.0000001048 0.0000021335 -0.0000028095 -0.0000005998 -0.0000002778 0.0000105744 0.0000074418 0.0000043887 -0.0000049601 -0.0000148432 0.0000047000 0.0000006483 -0.0000010149 -0.0000004315 -0.0000019421 0.0000019091 0.0000012181 -0.0000010729 -0.0000029538 0.0000003228 0.0000018268 -0.0000018858 -0.0000011294 0.0000075618 0.0000355328 -0.0000019299 -0.0000131040 0.0000117632 0.0000064158 0.0000009294 -0.0000008179 -0.0000007330 0.0000016718 0.0000010434 -0.0000008174 -0.0000057484 -0.0000022135 -0.0000003135 -0.0000174052 -0.0000085979 0.0000085482 -0.0000017845 -0.0000015112 -0.0000013036 0.0000010685 0.0000008894 0.0000008076 0.0000006477 0.0000004447 0.0000002435 0.0000028545 -0.0000023237 0.0000018060 -0.0000018463 0.0000011042 0.0000036631 -0.0000247244 0.0000206878 -0.0000175480 -0.0000004432 0.0000023890 -0.0000003256 0.0000029819 0.0000009285 0.0000016885 -0.0000031944 -0.0000356468 -0.0000013634 -0.0000182092 -0.0000123691 -0.0000108135 -0.0019324863 0.0005000754 -0.0035611827 0.0218206504 0.0161378163 -0.0088630453 0.0192884672 -0.0390913677 0.0376071695 -0.0185759820 0.0168898034 0.0128001492 0.0000582364 0.0000042829 0.0002323073 -0.0004497268 0.0010609427 -0.0012694666 -0.0004460065 -0.0007890464 -0.0011027544 0.0004011984 -0.0004069721 -0.0001401845 0.0000000224 -0.0000043764 -0.0000012354 -0.0000077993 0.0000084327 -0.0000001215 -0.0000003101 0.0000014335 0.0000017670 0.0000031493 -0.0000006132 -0.0000015574 -0.0000129649 0.0000099123 0.0000054000 -0.0000154020 -0.0000063752 -0.0000086092 0.0000036057 -0.0000015512 0.0000017259 -0.0000003437 0.0000020911 -0.0000008009 0.0000020827 0.0000016453 0.0000010869 0.0000004007 -0.0000179608 0.0000022278 0.0000253817 0.0000120924 -0.0000018804 0.0000160141 -0.0000080559 0.0000004668 -0.0000281902 -0.0000103646 -0.0000073070 0.0000168981 0.0000057167 -0.0000009431 0.0000441251 0.0000165805 0.0000007632 0.0041383798 0.0020605434 0.0017811823 0.0000119957 0.0001994053 0.0003600648 0.0000020095 -0.0000449964 -0.0000164922 -0.0001148233 0.0001744664 0.0000876315 0.0000353539 -0.0000000202 -0.0000206252 -0.0000176711 -0.0000619892 -0.0000734605 -0.0001084134 0.0001211275 0.0000323453 -0.0001288368 0.0000145906 -0.0000540028 -0.0002288784 -0.0001165961 0.0002791372 0.0002706077 0.0002189225 0.0000311097 0.0005989098 0.0000251796 -0.0004547087 -0.0000930673 -0.0003211083 -0.0003199712 -0.0003442072 0.0006963925 -0.0000961270 -0.0018216889 -0.0017947605 -0.0001809783 -0.0000124392 -0.0001030690 0.0000000569 0.0000069501 0.0000069929 0.0000184334 0.0000167990 0.0000115142 0.0000022532 -0.0000668950 -0.0000319802 0.0000447864 0.0000044048 0.0000095878 0.0000163333 -0.0000264769 0.0000000933 0.0000160927 0.0001772035 0.0000883638 0.0000565946 0.0006099097 0.0001580874 -0.0005260433 -0.0001945025 -0.0001395724 -0.0000568590 0.0002096675 0.0001262927 -0.0001463338 0.0000098854 -0.0000433786 -0.0000965993 0.0000795112 0.0000842434 0.0001715467 -0.0005994835 -0.0010590150 -0.0024566909 -0.0000008189 -0.0000007045 0.0000006024 -0.0006762590 -0.0005626538 -0.0001126568 0.0009875530 -0.0000513832 -0.0008729602 0.0000175618 0.0002486925 0.0002845127 -0.0000831056 -0.0000582183 0.0000397223 -0.0000012250 -0.0000778642 0.0002997212 0.0003526180 0.0001716938 0.0001758829 0.0024257349 -0.0015995144 -0.0025115627 -0.0003655555 -0.0002382878 0.0000107010 -0.0001777677 0.0002705599 0.0000624926 0.0030631770 -0.0012012139 -0.0024024124 0.0000891985 0.0034294948 0.0001740036 -0.0031113410 -0.0007146880 -0.0012204903 -0.0025044193 0.0020164650 0.0018873333 0.0001253798 0.0012606575 -0.0039321628 -0.0014351560 -0.0050626038 0.0000746097 0.0106146750 0.0415997807 0.0089634326 -0.0377399848 -0.0007177658 -0.0168748098 -0.0004485212 -0.0222119704 0.0366871181 0.0014882414 -0.0054364427 0.0009512518 -0.0013959478 0.0003437754 -0.0022462120 0.0020805050 0.0015911022 0.0001385849 -0.0000075714 -0.0000008753 0.0000023197 0.0000036561 -0.0000021564 -0.0000001693 0.0000031321 0.0000059198 0.0000057202 0.0000040446 0.0000002482 -0.0000005657 -0.0000007984 -0.0000028837 -0.0000019092 0.0000028437 -0.0000021744 -0.0000032678 -0.0000206212 0.0000166588 0.0000211083 -0.0000459374 -0.0000146891 -0.0000390669 -0.0000056073 0.0000063768 -0.0000011173 -0.0000290517 0.0000345199 -0.0000040290 -0.0000130538 0.0000089045 0.0000016866 -0.0000010765 0.0000006853 -0.0000029827 0.0000022594 -0.0000025730 -0.0000032684 -0.0000016804 0.0000011228 -0.0000030354 0.0000124989 0.0000016496 0.0000189146 -0.0000033691 0.0000039934 -0.0000005632 0.0000042488 -0.0000072184 0.0000212524 -0.0000136360 0.0000142150 0.0000304301 0.0000042648 -0.0000017132 0.0000268998 -0.0001045595 -0.0000326173 -0.0001529778 0.0000075221 -0.0000272249 0.0000022476 0.0000021913 -0.0000043961 -0.0000015227 0.0000022964 -0.0000051763 0.0000023790 -0.0000067639 0.0000005738 -0.0000140356 0.0000040023 -0.0000001292 -0.0000109254 -0.0000000562 -0.0000005154 -0.0000010199 -0.0000005708 0.0000014019 0.0000007148 -0.0000015473 -0.0000026497 0.0000003132 0.0000042787 -0.0000032141 -0.0000031146 0.0000049098 0.0000443774 -0.0000014844 -0.0000329859 0.0000328341 0.0000194133 0.0000001897 -0.0000005707 -0.0000004818 0.0000039182 0.0000011946 -0.0000025600 -0.0000039232 -0.0000071707 -0.0000024499 -0.0000336478 -0.0000155608 0.0000171283 -0.0000019351 -0.0000002444 -0.0000012798 0.0000005075 0.0000005509 0.0000003113 0.0000011422 0.0000008324 0.0000001030 0.0000017293 -0.0000017656 0.0000007048 -0.0000054531 -0.0000074855 0.0000005299 -0.0000172612 0.0000118649 -0.0000132919 0.0000000666 0.0000015443 -0.0000005402 0.0000023680 0.0000008556 0.0000008762 -0.0000026508 -0.0000247798 -0.0000006247 -0.0000159709 -0.0000112917 -0.0000102315 0.0271882316 -0.0072490437 0.0505473749 -0.3067543034 -0.2273231869 0.1244896921 -0.2733003581 0.5543063505 -0.5331362420 0.2632113945 -0.2396767526 -0.1815222595 0.0017031992 0.0020775590 -0.0019201284 0.0094279189 -0.0324126142 0.0342263606 -0.0104443887 -0.0105897745 -0.0217549939 -0.0184429495 0.0197594480 0.0099285052 0.0000004567 0.0000019672 -0.0000001206 0.0000076353 -0.0000006820 -0.0000032068 0.0000000535 -0.0000014804 -0.0000012308 0.0000001950 0.0000021269 0.0000003212 0.0000046479 -0.0000029604 -0.0000008322 0.0000058877 0.0000041245 0.0000045083 -0.0000014413 0.0000007403 -0.0000008792 0.0000001544 -0.0000046798 -0.0000014840 -0.0000025466 0.0000031866 0.0000009636 -0.0000166281 0.0000163075 -0.0000000898 -0.0000129713 -0.0000136007 0.0000029536 -0.0000068482 -0.0000043910 -0.0000025392 0.0000144671 0.0000311773 0.0000099830 -0.0000040292 -0.0000235915 -0.0000031410 -0.0000124995 -0.0000438698 -0.0000200484 -0.0017422823 -0.0009416317 -0.0004850040 0.0000079696 -0.0000078588 -0.0000192170 0.0000083948 0.0000083553 -0.0000001106 0.0000015565 -0.0000256697 -0.0000167303 -0.0000081961 -0.0000047573 -0.0000000274 0.0000009065 0.0000081973 0.0000109754 -0.0000035032 -0.0000061506 -0.0000065826 0.0000041703 -0.0000371508 -0.0000112872 0.0000192605 0.0000207839 -0.0000191563 -0.0000298048 -0.0000443318 -0.0000014664 -0.0000033421 -0.0000147081 0.0000200509 0.0000660970 0.0000776710 0.0000988215 0.0000935857 -0.0001868506 0.0000580571 0.0001561863 0.0002409592 -0.0000780868 0.0000039765 0.0000236978 -0.0000181785 0.0000024635 -0.0000014128 -0.0000087980 -0.0000148629 -0.0000060751 -0.0000015247 -0.0000333794 -0.0000203264 0.0000435356 -0.0000104453 -0.0000096034 -0.0000072102 0.0000013150 -0.0000021785 -0.0000020574 0.0000608846 0.0000465286 0.0000355557 0.0004592125 0.0001397721 -0.0002371999 0.0001150580 0.0001244398 0.0000450878 -0.0000183553 -0.0000234372 0.0000113860 -0.0000015516 0.0000149718 0.0000517883 0.0000472796 0.0000705662 0.0001817590 -0.0001758087 -0.0011147349 -0.0026201263 -0.0000075952 0.0000030134 -0.0000053233 -0.0001221083 -0.0000289051 -0.0000468232 -0.0000617013 0.0000399523 0.0002435482 -0.0001183099 -0.0001324947 -0.0000774555 0.0000954175 0.0004229539 -0.0008989169 0.0207936629 -0.0253819488 0.0420958986 -0.0009214467 0.0000535105 -0.0002174056 0.0015067829 -0.0008495156 -0.0017246567 0.0000390155 0.0000101493 -0.0000300591 0.0000794098 -0.0000862742 -0.0000812031 0.3075529622 -0.1339860380 -0.2558190205 0.0358299156 0.5867259384 0.0393457252 -0.5883129855 -0.1598931764 -0.2636083126 0.0078695007 -0.0055376255 -0.0052526502 0.0004449218 -0.0030615095 0.0100197826 0.0020534607 0.0076005153 -0.0002167813 0.0064341641 0.0248468706 0.0051262691 -0.0233217997 -0.0003784492 -0.0100142113 -0.0008629287 -0.0152091243 0.0262087504 -0.0006610490 0.0022096698 -0.0003101144 0.0009230308 -0.0002088310 0.0014698875 -0.0012621992 -0.0009220905 -0.0000436341 0.0000043491 0.0000011791 -0.0000010184 -0.0000012236 -0.0000013680 -0.0000036242 -0.0000001187 -0.0000011695 -0.0000025792 -0.0000024847 -0.0000002794 0.0000005863 0.0000015172 -0.0000000911 -0.0000016798 -0.0000020622 -0.0000004941 0.0000004466 0.0000000068 0.0000076250 0.0000301688 0.0000147662 -0.0000003827 0.0000130858 0.0000049300 0.0000004410 0.0000038619 -0.0000016455 -0.0000014504 0.0000195653 0.0000139481 0.0000087831 0.0000033692 0.0000065187 -0.0000017416 0.0000091571 -0.0000042532 -0.0000020696 0.0000038425 0.0000782537 0.0000129155 -0.0000348286 0.0000217214 0.0000061941 0.0000328379 0.0000024256 0.0000059802 0.0000042807 -0.0000409643 0.0000055961 -0.0000707074 -0.0000368197 0.0000254628 0.0000032315 -0.0001702221 0.0000207201 0.0002179273 -0.0003947105 -0.0001065988 -0.0002751588 -0.0000272362 0.0000229214 0.0000068289 -0.0000007271 0.0000001456 -0.0000017072 -0.0000029883 -0.0000000970 -0.0000031325 -0.0001035739 -0.0001013807 -0.0000760724 0.0000344138 -0.0000973990 -0.0000426928 0.0000000405 0.0000000356 0.0000002137 -0.0000015055 -0.0000009607 0.0000006174 0.0000009046 0.0000019661 -0.0000004197 -0.0000007076 -0.0000000284 0.0000003292 -0.0000009223 -0.0000236882 -0.0000026348 0.0000049887 0.0000047352 -0.0000030936 0.0000011222 0.0000026216 -0.0000004624 0.0000010126 0.0000008753 -0.0000005536 -0.0000076064 -0.0000096839 0.0000083996 -0.0000135779 0.0000030361 0.0000083506 0.0000017462 -0.0000007160 0.0000006982 -0.0000004371 -0.0000001728 0.0000006669 -0.0000010581 -0.0000030145 -0.0000000969 0.0000014203 0.0000000665 0.0000009980 0.0000076692 0.0000428982 -0.0000046232 -0.0000026208 0.0000060633 -0.0000002580 -0.0000005610 0.0000010852 0.0000000377 0.0000022754 0.0000002229 0.0000015220 -0.0000085425 -0.0000171492 0.0000023216 -0.0000208296 -0.0000072384 -0.0000070360 -0.0006129939 0.0001711897 -0.0009991002 0.0061548633 0.0045359738 -0.0022982798 0.0056726506 -0.0110945021 0.0107598125 -0.0045905674 0.0043285804 0.0031823975 0.0039979412 0.0073950755 -0.0054517808 0.0228518151 -0.0936103653 0.0991957170 -0.0304933660 -0.0301662614 -0.0562699993 -0.0395391625 0.0419370479 0.0201996566 0.0000032649 -0.0000086980 -0.0000028454 -0.0000091862 -0.0000269553 -0.0000152680 -0.0000014265 0.0000064876 0.0000032064 0.0000059979 -0.0000059964 -0.0000041426 -0.0000344601 0.0000282865 0.0000167608 -0.0000354847 -0.0000177092 -0.0000213905 0.0000065572 -0.0000019294 0.0000047878 -0.0000009880 0.0000211464 0.0000034416 0.0000065299 -0.0000042553 -0.0000000321 0.0000162785 -0.0001278706 0.0000094771 0.0000650868 0.0000397797 -0.0000189312 0.0000544434 -0.0000235466 0.0000048247 -0.0000707354 -0.0000377976 0.0000113667 0.0000520158 0.0000053492 -0.0000189538 -0.0000228039 0.0001332086 0.0000389637 0.0044720356 0.0027778138 0.0005819575 -0.0000144831 0.0001533180 0.0002257187 -0.0000307938 -0.0000338914 -0.0000152432 -0.0000234464 0.0000872285 0.0000404465 0.0000230276 -0.0000087972 -0.0000262993 -0.0000010651 -0.0000270071 -0.0000436509 0.0000155486 0.0000286000 0.0000346059 0.0000642010 0.0003293308 0.0000772809 -0.0000516475 -0.0000507089 0.0001148334 0.0000209778 0.0000138494 -0.0000204509 0.0000256807 0.0000143388 -0.0001011973 -0.0000776819 -0.0000695073 -0.0003478762 -0.0004584352 0.0007133516 -0.0002603616 0.0001219568 -0.0004400099 0.0006209581 -0.0000303185 -0.0000868031 0.0000732275 0.0000011798 0.0000016529 0.0000153886 0.0000360261 0.0000184445 -0.0000012063 0.0003350901 0.0001985169 -0.0003945466 -0.0000250918 -0.0000058199 0.0000277640 -0.0000095108 0.0000026791 0.0000107578 -0.0001916576 -0.0001997317 -0.0001123219 -0.0040984786 -0.0012469235 0.0027469212 0.0002811611 0.0002187337 0.0000749587 0.0001033757 0.0000436059 -0.0000823204 0.0000104841 -0.0000600506 -0.0001633512 -0.0002545330 -0.0003806558 -0.0008283455 0.0001646184 0.0055966946 0.0118278874 0.0000178724 -0.0000076529 0.0000264129 0.0004807565 0.0002333955 0.0004858355 0.0005252546 -0.0006468862 -0.0013725757 0.0003299869 0.0004660443 0.0003291760 0.0000259841 -0.0000688729 -0.0000077893 0.0061328737 -0.0058821290 0.0058276176 -0.0015895962 -0.0005864797 -0.0011965047 0.0001745154 0.0000776929 -0.0002419591 -0.0003854874 -0.0000845044 0.0002343955 -0.0004937847 0.0006981272 0.0007038682 0.0311017623 -0.0139094885 -0.0265984806 0.0081202101 0.1081419668 0.0061713419 -0.1096857083 -0.0296580099 -0.0494709266 0.0112626827 -0.0107303581 -0.0097463123 -0.0009543321 -0.0069146583 0.0210617109 0.0066798701 0.0234818538 0.0002340967 0.0003272376 0.0014559550 0.0003650818 -0.0024097134 -0.0000452306 -0.0008331376 -0.0000078246 -0.0019657739 0.0030156870 0.0047533998 -0.0174473412 0.0027454594 -0.0074144616 0.0016040425 -0.0122364092 0.0089279606 0.0068267812 0.0002491163 -0.0000088154 -0.0000010187 0.0000005184 0.0000060020 0.0000010417 0.0000015197 -0.0000002920 -0.0000002317 0.0000023679 0.0000042281 -0.0000003437 -0.0000016891 0.0000035995 -0.0000032286 -0.0000048416 0.0000006212 -0.0000029489 -0.0000032380 -0.0000223937 0.0000207604 -0.0000125846 0.0000006292 0.0000243400 -0.0000245634 -0.0000028613 0.0000009849 -0.0000080083 -0.0000319766 0.0000266294 0.0000385232 0.0000047518 0.0000195339 0.0000037174 -0.0000125809 -0.0000037595 -0.0000237000 0.0000013299 -0.0000011387 0.0000005301 -0.0000081786 0.0000281637 0.0000097717 -0.0000213000 -0.0000285739 -0.0000692914 -0.0000148970 -0.0000067116 -0.0000252201 0.0000701299 -0.0000097177 0.0001404546 -0.0000716173 -0.0000098941 0.0000243305 0.0000005826 0.0000308188 0.0001185527 0.0005856639 0.0003594767 0.0007267784 0.0000721084 0.0000387989 0.0001011551 0.0000004929 -0.0000024995 0.0000035599 0.0000039099 -0.0000012490 0.0000043928 -0.0000438124 -0.0000304959 -0.0000539041 0.0000065619 -0.0000340096 -0.0000336961 0.0000013549 -0.0000004808 -0.0000023006 0.0000009245 0.0000049949 -0.0000003681 0.0000000785 0.0000069047 0.0000001060 0.0000034833 -0.0000015696 -0.0000029412 -0.0000101427 -0.0000335827 -0.0000126769 -0.0000123109 0.0000304733 -0.0000032460 0.0000008001 0.0000083151 -0.0000003122 0.0000109921 0.0000029570 -0.0000070045 -0.0000184003 -0.0001038823 -0.0000092680 -0.0000976293 -0.0000304576 0.0000467781 -0.0000059304 0.0000011512 -0.0000023916 0.0000012073 0.0000013342 -0.0000008373 0.0000038280 0.0000084987 0.0000011374 -0.0000045192 0.0000012847 -0.0000032179 -0.0000228053 -0.0000949170 -0.0000114766 0.0000225551 -0.0000146852 0.0000074266 0.0000011520 0.0000079384 -0.0000001344 -0.0000007726 0.0000012304 -0.0000007328 -0.0000028093 -0.0000628721 0.0000036781 0.0000069579 0.0000115149 0.0000018009 0.0020890260 -0.0004755431 0.0030271628 -0.0201629019 -0.0145918906 0.0067428382 -0.0176732276 0.0326246053 -0.0332477443 0.0126987332 -0.0122713880 -0.0090145803 -0.0263946807 -0.0403414460 0.0292294629 -0.1281242663 0.5414934308 -0.5582759800 0.1889798522 0.1913387915 0.3508413718 0.2470967319 -0.2602487532 -0.1275903892 0.0000005614 -0.0000057585 -0.0000013561 -0.0000120837 -0.0000011829 -0.0000049300 -0.0000003818 0.0000033543 0.0000030883 0.0000043018 -0.0000019637 -0.0000021162 -0.0000208096 0.0000165457 0.0000085446 -0.0000297398 -0.0000131595 -0.0000170121 0.0000064995 -0.0000023469 0.0000037129 -0.0000008502 0.0000090577 0.0000001383 0.0000044491 0.0000024057 0.0000026358 0.0000017640 -0.0000730222 -0.0000011424 0.0000438920 0.0000255605 0.0000024234 0.0000295895 -0.0000102292 0.0000078629 -0.0000482688 -0.0000370228 -0.0000269151 0.0000138282 0.0000261650 0.0000109727 0.0000652551 0.0000551549 0.0000343385 0.0058760945 0.0027420196 0.0022730038 -0.0000049096 0.0000934787 0.0001287802 -0.0000158257 -0.0000280228 -0.0000138866 -0.0000014915 0.0000431606 0.0000624573 0.0000245075 0.0000168310 -0.0000040936 -0.0000123217 -0.0000288951 -0.0000226777 0.0000302258 0.0000155020 -0.0000106343 -0.0000254770 -0.0000246065 -0.0000076121 -0.0001597699 -0.0000602791 0.0001596654 0.0002160177 0.0002749999 -0.0000090917 -0.0001592852 0.0000277144 0.0001663431 -0.0002642667 -0.0003222557 -0.0002739802 -0.0001722562 0.0004008105 -0.0000349335 -0.0011956255 -0.0007563958 -0.0000555227 -0.0000012085 -0.0000160305 -0.0000674659 -0.0000161146 -0.0000286181 0.0000621090 -0.0001267065 0.0001100810 0.0000247140 0.0000065310 -0.0000149653 0.0000391464 0.0000330376 0.0000222655 -0.0000112139 -0.0000220589 0.0000458878 -0.0000030107 0.0003159790 -0.0002493263 -0.0001637705 0.0001228569 -0.0000325821 -0.0002388295 -0.0003820573 -0.0003349510 -0.0001612228 0.0002742275 0.0001683228 -0.0000359947 0.0000057379 -0.0001231083 -0.0004077113 0.0000057967 -0.0000020977 -0.0000393290 -0.0001128241 0.0001871706 0.0006187277 0.0000010833 -0.0000037456 0.0000002274 0.0005727101 -0.0002173036 -0.0000686079 -0.0027030977 -0.0015088449 0.0000831138 0.0000087781 0.0005650856 0.0005861785 0.0000823364 -0.0000407711 -0.0000360580 0.0000692610 -0.0000010502 0.0000296472 -0.0001675221 -0.0000519928 -0.0001456885 -0.0001840546 -0.0007031553 -0.0003981868 0.0018438187 0.0002746001 -0.0012739856 0.0210173243 -0.0264856197 -0.0326253784 -0.0003322547 -0.0000284710 0.0003426999 0.0000433965 0.0003217744 -0.0000655787 -0.0007685522 -0.0001786919 -0.0005568953 0.0008248813 -0.0008885332 -0.0007455356 -0.0000400058 -0.0009090863 0.0024952752 0.0008449493 0.0026706201 0.0000096761 0.0022875035 0.0091209317 0.0022458440 -0.0017685825 -0.0009500747 -0.0012984381 0.0004559847 -0.0015875579 0.0034273234 -0.1841546735 0.6470295120 -0.0957298834 0.2881819182 -0.0610693272 0.5007303237 -0.3565717387 -0.2655166216 -0.0028336054 -0.0000095220 -0.0000008846 0.0000012393 0.0000029641 -0.0000000610 0.0000066568 0.0000005178 0.0000026202 0.0000038553 0.0000044260 -0.0000003588 -0.0000008163 0.0000005863 -0.0000024485 -0.0000009441 0.0000014911 -0.0000027269 -0.0000018791 -0.0000113940 0.0000060758 -0.0000502921 -0.0000227814 0.0000269464 -0.0000526349 0.0000021560 0.0000044570 -0.0000253778 -0.0000266291 0.0000419196 -0.0000023036 -0.0000142594 0.0000125898 -0.0000034480 -0.0000048109 0.0000034365 -0.0000015131 0.0000045169 -0.0000031904 0.0000015423 -0.0000058611 0.0000034871 -0.0000022093 0.0000030532 -0.0000005439 -0.0000003543 -0.0000032182 0.0000052024 0.0000025411 0.0000147267 -0.0000083808 0.0000222631 -0.0000091897 0.0000149903 0.0000277172 0.0000224152 -0.0000154498 -0.0000074758 -0.0000049084 -0.0000267640 -0.0000118862 0.0000099435 -0.0000602881 -0.0000347561 -0.0000057642 -0.0000035723 0.0000131127 0.0000027021 -0.0000038626 0.0000122012 -0.0000061234 0.0000035115 0.0000005699 -0.0000122672 0.0000071709 0.0000080493 0.0000001186 -0.0000005678 -0.0000009888 -0.0000003974 0.0000024053 0.0000009503 -0.0000013608 -0.0000020233 0.0000010182 0.0000051783 -0.0000034617 -0.0000029212 0.0000032082 0.0000469545 -0.0000025964 -0.0000369365 0.0000389514 0.0000217299 0.0000010195 0.0000026017 0.0000000545 0.0000059977 0.0000014078 -0.0000030183 -0.0000129087 -0.0000448982 -0.0000005568 -0.0000514581 -0.0000203309 0.0000263648 -0.0000040078 -0.0000002830 -0.0000023098 0.0000010590 0.0000012382 0.0000005582 0.0000019963 0.0000011736 0.0000012339 0.0000019996 -0.0000025973 0.0000013885 -0.0000125824 -0.0000106749 -0.0000089218 -0.0000261040 0.0000215377 -0.0000179155 0.0000000908 0.0000064807 -0.0000003163 0.0000049491 0.0000024150 0.0000027158 -0.0000070574 -0.0000755854 -0.0000018737 -0.0000408798 -0.0000207589 -0.0000221822 0.0004085103 0.0002801177 0.0001929563 -0.0055145793 -0.0036685702 0.0025491963 -0.0014921784 0.0027954420 -0.0029226196 0.0020375376 -0.0013647492 -0.0013089321 -0.0006589739 -0.0010681971 0.0007729215 -0.0030237315 0.0143023857 -0.0148142711 0.0045113211 0.0044406584 0.0082810294 0.0062044159 -0.0063271866 -0.0030429360 -0.0000003501 0.0000019318 0.0000003123 0.0000099040 0.0000284480 0.0000000534 -0.0000000109 -0.0000038998 -0.0000016726 -0.0000009893 0.0000014331 0.0000004731 0.0000081232 -0.0000075067 -0.0000033164 0.0000088385 0.0000047090 0.0000051456 -0.0000018215 0.0000010054 -0.0000017382 -0.0000003657 -0.0000087651 -0.0000012328 -0.0000015811 0.0000003917 -0.0000005587 0.0000009676 0.0000739876 -0.0000009411 -0.0000132290 -0.0000109300 -0.0000004255 -0.0000146715 -0.0000004312 -0.0000072546 0.0000193499 0.0000346830 0.0000174115 0.0000054178 -0.0000263165 -0.0000112748 -0.0000160503 -0.0000368720 -0.0000422289 0.0044397170 0.0025699111 0.0019669712 -0.0000394443 0.0003003269 0.0005027417 0.0000633777 -0.0000202297 -0.0000021510 -0.0001891601 0.0002920017 0.0001610763 -0.0000576217 -0.0001128540 -0.0000013357 0.0000234582 -0.0000246994 -0.0000934582 -0.0004481428 0.0000812360 0.0002595904 -0.0000176418 0.0002711417 -0.0001299004 0.0003202437 0.0001983932 -0.0003674114 -0.0004396429 -0.0006489107 0.0000139750 0.0031092379 0.0005557639 -0.0032596729 -0.0001821065 -0.0003686523 -0.0002642440 0.0001682364 0.0004074947 0.0001552843 -0.0023594550 -0.0041194652 0.0016415728 -0.0001122642 -0.0000921713 -0.0000046160 0.0000019032 -0.0000021768 -0.0000136848 -0.0000379136 -0.0000395271 -0.0000151179 0.0000013509 -0.0000033796 -0.0000093217 -0.0000052663 -0.0000083516 0.0000043959 -0.0000078298 0.0000023206 0.0000017290 0.0006621471 0.0005495182 0.0003936274 0.0001267763 0.0001222080 -0.0001871278 -0.0000659575 -0.0000511169 -0.0000630231 0.0000193266 0.0000164834 -0.0000104548 0.0000022482 0.0000535956 0.0002295924 0.0002105948 0.0001873956 0.0007474458 -0.0032463598 -0.0038929683 -0.0110795490 -0.0000026292 0.0000021484 -0.0000021192 -0.0003354589 -0.0001474536 -0.0011494605 0.0001806065 -0.0000688842 0.0000868186 -0.0000584572 0.0000187744 -0.0000809737 0.0000020011 0.0000188895 -0.0000116782 0.0002772136 0.0004905318 0.0001708280 -0.0001106857 0.0001757969 0.0002097053 -0.0000360989 -0.0001885785 0.0000823388 0.0000682743 -0.0001595726 -0.0002481784 -0.0000013589 0.0001014510 0.0002416134 0.0001117007 -0.0001187760 -0.0001750015 -0.0002231840 -0.0049231331 -0.0001683521 -0.0032141220 -0.0009824572 -0.0015887249 0.0016920016 -0.0012988107 -0.0011906481 0.0000401934 0.0004788488 -0.0012754583 -0.0004490040 -0.0013569051 0.0000153424 0.0003612404 0.0015120282 0.0003527851 0.0000609088 -0.0000082162 0.0000116435 0.0000213542 0.0007421599 -0.0012371721 0.0005126593 -0.0016980896 0.0002124369 -0.0015217722 0.0002678056 -0.0032805676 0.0001691433 0.0001715972 0.0000327939 0.0000026713 0.0000013924 0.0000002831 0.0000009496 -0.0000053808 -0.0000100553 0.0000015484 0.0000025467 -0.0000015946 -0.0000033601 -0.0000024902 0.0000010320 -0.0000008182 -0.0000005491 -0.0000014461 -0.0000011603 -0.0000004184 -0.0000010009 -0.0000221488 0.0000268166 0.0001136368 0.0000019940 -0.0000178282 0.0000252640 0.0000138997 0.0000082271 0.0000259731 -0.0000032205 0.0000086719 0.0000130111 0.0000068698 0.0000044164 0.0000042911 0.0000043470 -0.0000011176 0.0000047951 -0.0000013396 0.0000003202 -0.0000017486 0.0000043626 -0.0000034373 0.0000009000 -0.0000041887 0.0000023299 -0.0000032920 0.0000049369 -0.0000038834 -0.0000010386 -0.0000245362 -0.0000013761 -0.0000493793 -0.0000006507 0.0000013229 -0.0000015159 -0.0000115901 0.0000016243 -0.0000146684 0.0000016471 -0.0000072431 0.0000360277 -0.0000290688 0.0000435445 0.0000299243 0.0000010180 -0.0000021185 -0.0000131582 -0.0000127478 -0.0000023389 -0.0000127300 0.0000077873 0.0000016647 0.0000088343 0.0000030407 0.0000016185 0.0000035193 -0.0000003141 -0.0000000562 0.0000002354 -0.0000002314 -0.0000009788 -0.0000002830 0.0000001787 -0.0000009695 -0.0000005737 -0.0000008615 -0.0000000559 0.0000000687 0.0000012420 0.0000001391 -0.0000034784 -0.0000022145 -0.0000011933 -0.0000041982 0.0000000095 -0.0000004289 -0.0000002319 -0.0000032428 -0.0000007630 0.0000014859 0.0000013555 0.0000139795 0.0000027523 0.0000267098 0.0000109682 -0.0000216866 0.0000014857 -0.0000003920 0.0000003224 -0.0000003069 -0.0000003857 -0.0000002025 -0.0000017648 -0.0000128851 0.0000000937 -0.0000004092 0.0000020257 -0.0000008392 0.0000138037 0.0001407133 -0.0000211978 0.0000185018 -0.0000164188 0.0000061603 -0.0000003705 -0.0000054804 -0.0000002092 -0.0000013830 -0.0000008304 -0.0000011725 0.0000052977 0.0000559989 -0.0000046100 0.0000157217 0.0000049842 0.0000018377 -0.0129508295 0.0866237967 -0.0173248537 -0.4324539602 -0.2987643019 0.1629807443 0.1859447811 -0.3678870365 0.3616214915 0.4092014527 -0.3597382132 -0.3020197149 -0.0001492768 -0.0008994669 -0.0006795132 -0.0015832251 -0.0002631432 -0.0006384526 0.0047060996 0.0034785338 0.0072148529 -0.0034297581 0.0047380545 0.0022225290 -0.0000011197 0.0000009585 0.0000004825 0.0000031506 0.0000276514 0.0000050264 -0.0000002013 -0.0000028115 -0.0000001616 -0.0000003898 0.0000010994 0.0000006562 0.0000042037 -0.0000036921 -0.0000029959 0.0000092383 0.0000054303 0.0000049891 -0.0000016965 -0.0000006187 -0.0000014543 -0.0000003511 -0.0000095024 -0.0000020330 -0.0000004655 0.0000014096 -0.0000005697 -0.0000000785 0.0000716269 -0.0000028181 -0.0000109450 -0.0000046308 0.0000037630 -0.0000081824 0.0000074271 0.0000015648 0.0000121095 -0.0000116144 -0.0000106994 -0.0000047202 0.0000103290 0.0000076680 -0.0000011424 0.0000041388 0.0000034931 -0.0003043742 -0.0001545482 -0.0000959120 -0.0000008826 -0.0000186270 -0.0000187312 -0.0000003337 0.0000014888 0.0000018625 0.0000019022 -0.0000027717 -0.0000029657 -0.0000013878 0.0000013191 0.0000027019 -0.0000007556 -0.0000002963 0.0000010006 0.0000004189 -0.0000015462 0.0000001746 -0.0000023850 -0.0000079929 0.0000003886 0.0000191766 0.0000005886 -0.0000207739 0.0000084103 0.0000135870 0.0000061010 -0.0000021244 0.0000027373 0.0000026603 0.0000124446 0.0000158123 0.0000129491 -0.0000034333 -0.0000343225 0.0000014849 0.0002339048 0.0002169244 0.0000421957 0.0000004611 0.0000080413 -0.0000019226 -0.0000001512 0.0000022905 0.0000053302 0.0000118016 0.0000093291 0.0000069696 -0.0000459290 -0.0000230941 0.0000462629 -0.0000247516 -0.0000179476 -0.0000183656 0.0000126129 0.0000029531 -0.0000104824 -0.0001384343 -0.0000837550 -0.0000569231 0.0004919024 0.0002220246 -0.0004490017 0.0002678416 0.0002841507 0.0001328058 -0.0001233933 -0.0000425441 0.0000895825 -0.0000039131 -0.0000231184 -0.0001245698 -0.0000024210 -0.0000009503 -0.0000093480 0.0000870814 0.0000320442 0.0001400630 -0.0000013952 0.0000031062 -0.0000008289 0.0000199045 -0.0000107481 -0.0000187454 -0.0000249301 0.0000248070 0.0001536135 -0.0000976303 -0.0001041905 0.0000443360 0.0001562534 0.0000769802 -0.0000687172 0.0447662481 0.0584081878 0.0190823920 0.0020340541 -0.0006026699 -0.0043079400 -0.0285389051 -0.0446512157 -0.0005899463 0.0000223321 -0.0000114304 -0.0000330522 -0.0002358283 -0.0001356388 0.0001594804 -0.0215288146 0.0197628620 0.0264319439 -0.0274465443 -0.5981256737 -0.0280445256 -0.4893890212 -0.1243640510 -0.2251954891 -0.0245338869 0.0186468868 0.0160091480 -0.0007858563 -0.0120194890 0.0352004497 0.0006980206 0.0012193169 -0.0007225498 0.1017465887 0.4325926575 0.0979956722 0.2368756275 -0.0030520266 0.1028531944 0.0016837531 0.1068271296 -0.1922846581 0.0005080634 -0.0010670599 0.0004063282 -0.0010349896 0.0004991574 -0.0019156295 0.0030673395 0.0021297279 -0.0000391515 0.0000000769 -0.0000000449 0.0000002017 -0.0000010729 0.0000008133 0.0000021223 -0.0000004975 -0.0000004515 -0.0000001220 0.0000003545 0.0000004987 -0.0000000635 -0.0000013429 0.0000003690 0.0000017325 0.0000015013 0.0000011768 0.0000012694 0.0000104721 -0.0000096332 -0.0000208354 0.0000007219 0.0000072881 0.0000088027 -0.0000023467 0.0000002907 0.0000030939 0.0000044900 -0.0000017458 -0.0000157620 -0.0000156740 -0.0000152488 -0.0000143582 0.0000145639 -0.0000038027 0.0000114192 -0.0000029930 0.0000002093 -0.0000214721 -0.0000280909 -0.0000374203 0.0000277090 0.0000006743 0.0000112971 0.0000191469 0.0000130883 -0.0000122622 -0.0000081483 -0.0000704930 -0.0000229415 -0.0001578052 -0.0000297695 -0.0000001565 0.0000255983 0.0000118805 -0.0000288600 -0.0001710342 -0.0000784202 -0.0000095241 -0.0001139110 -0.0000664740 0.0001333948 0.0001455931 0.0000011157 -0.0000002370 -0.0000016314 0.0000003614 0.0000000621 -0.0000005580 0.0001119177 0.0000910823 0.0000669234 0.0000267448 0.0001057338 0.0000159061 -0.0000004261 0.0000001163 0.0000003386 -0.0000004309 -0.0000008898 0.0000003565 -0.0000016541 -0.0000069754 0.0000002862 0.0000013007 -0.0000011006 -0.0000007129 0.0000145264 0.0000697846 0.0000024308 -0.0000151116 0.0000071944 0.0000120896 -0.0000000833 -0.0000019314 -0.0000000019 -0.0000034939 -0.0000012788 0.0000020695 0.0000038292 0.0000215258 0.0000067547 0.0000350717 0.0000088073 -0.0000188888 0.0000011231 0.0000000363 0.0000001848 -0.0000001988 -0.0000002115 0.0000006577 -0.0000017222 -0.0000127387 0.0000002577 0.0000022745 -0.0000005472 0.0000012830 0.0000130254 0.0001382557 -0.0000135096 -0.0000108850 0.0000060730 -0.0000068082 -0.0000005069 -0.0000032046 -0.0000002364 0.0000019950 0.0000005238 0.0000008508 0.0000023250 0.0000251149 -0.0000031618 -0.0000179913 -0.0000138377 -0.0000118408 0.0001035732 -0.0005235501 0.0001116344 0.0023888218 0.0016933808 -0.0009067198 -0.0012392541 0.0022586910 -0.0024316301 -0.0024740599 0.0022036253 0.0018091480 0.0003840659 -0.0002914878 0.0001128178 0.0001205766 0.0007530310 -0.0012341647 -0.0012008096 -0.0010100209 -0.0020760023 -0.0031649630 0.0031446656 0.0015891222 -0.0000142278 0.0000093760 0.0000034962 -0.0000538357 -0.0001684956 0.0000052716 0.0000080983 0.0000195134 0.0000006323 -0.0000115321 0.0000053720 0.0000063249 0.0000420525 -0.0000330433 -0.0000436711 0.0000837211 0.0000460516 0.0000332239 -0.0000142383 -0.0000015741 -0.0000099635 -0.0000000669 -0.0000340593 0.0000000068 0.0000007037 -0.0000080456 -0.0000078268 0.0000113956 0.0003611366 0.0000151680 -0.0000915686 0.0000151286 0.0000593596 -0.0000891152 0.0001469091 0.0000550216 0.0000989472 -0.0003981604 -0.0002745751 -0.0000729593 0.0003360192 0.0001514845 0.0000851358 0.0002810807 0.0002433155 -0.0036778180 -0.0017371424 -0.0020617197 0.0000343138 -0.0006507437 -0.0010301388 -0.0000452939 0.0000224503 0.0001030865 0.0000513597 0.0000956514 0.0000099330 0.0000946252 0.0001458507 0.0000500008 0.0000115038 -0.0000048256 -0.0000216046 0.0000346546 -0.0000044405 -0.0000625344 -0.0001963093 -0.0002214790 0.0000200123 -0.0001788165 -0.0001581030 0.0000824493 0.0002445821 0.0003170821 -0.0000048701 -0.0003789017 -0.0000829626 0.0005722305 0.0004033419 0.0001208391 0.0000702735 -0.0001162530 0.0000704922 0.0000286259 -0.0002579389 -0.0001113486 0.0000195956 0.0000765787 0.0000303515 -0.0000115458 0.0000282239 -0.0000018722 -0.0000205127 -0.0000065830 0.0000017178 0.0000191708 -0.0006172660 -0.0002993482 0.0005315554 -0.0000027263 -0.0000468657 -0.0000402309 -0.0000189903 -0.0000134894 -0.0000060985 -0.0000107275 0.0000002683 -0.0000223517 0.0060185594 0.0025651690 -0.0057424304 -0.0000627356 0.0002403430 -0.0000393415 0.0000939409 0.0000625206 -0.0001094628 -0.0000139226 0.0000380747 0.0000287044 -0.0006880143 -0.0008452950 -0.0024694628 0.0107228338 0.0135628229 0.0372620535 0.0000142404 -0.0000080720 -0.0000083021 0.0000793650 -0.0000311585 -0.0000777490 0.0000264150 0.0001294123 0.0001469742 0.0000588717 -0.0000956591 -0.0000179806 0.0000331274 -0.0001040497 0.0000120360 0.0072093950 0.0110620089 0.0038662203 0.0209763918 -0.0841303084 -0.0165518847 0.0078826570 0.0218088910 -0.0061407891 -0.0000058719 -0.0000041679 -0.0000077532 0.0000596890 -0.0000136842 0.0000088356 0.0032380554 0.0002962482 -0.0011171184 -0.0055162370 -0.1114034048 -0.0050057531 -0.0858050159 -0.0214301905 -0.0397099858 -0.4508647581 0.3267584316 0.3007607946 0.0050424519 0.0240322007 -0.1044955452 0.2026851036 0.6613654051 0.0014974857 -0.0441079936 -0.1863395918 -0.0434920409 -0.0523040203 0.0028155362 -0.0222694927 -0.0026602071 -0.0787385181 0.1379683677 -0.0002033436 0.0006132882 -0.0001173591 0.0000088759 -0.0000752493 -0.0000137455 -0.0004535656 -0.0003256156 0.0000010971 -0.0000024356 -0.0000025501 0.0000030397 0.0000033411 -0.0000020213 -0.0000101051 0.0000004339 0.0000002557 0.0000006498 0.0000055273 0.0000025590 0.0000008882 -0.0000029571 -0.0000050336 -0.0000045246 0.0000109464 0.0000067929 0.0000027415 -0.0000261850 0.0000232675 0.0001074632 0.0000124116 0.0000060710 0.0000342205 -0.0000123290 0.0000013089 0.0000179506 -0.0000370164 0.0000279379 0.0000409486 -0.0000935757 -0.0001218172 -0.0000677173 0.0000336417 0.0000013461 0.0000493560 -0.0000239099 -0.0000080997 -0.0000318969 0.0000956047 -0.0000860301 0.0000460809 -0.0000391120 0.0000308353 0.0000007129 0.0000275203 -0.0000310039 -0.0000003514 -0.0003653908 -0.0000273003 -0.0007643643 -0.0015842983 -0.0002927819 0.0007526580 -0.0002250954 0.0000866059 0.0000824692 -0.0000000435 0.0000055384 0.0000676295 -0.0000329206 0.0001467780 0.0000957260 0.0000072079 -0.0000021507 -0.0000120749 0.0000024091 -0.0000013172 -0.0000057828 0.0000710313 0.0000107872 -0.0000068710 0.0000660422 -0.0001303382 -0.0000492616 -0.0000011466 0.0000017093 -0.0000000236 0.0000025724 -0.0000054216 -0.0000012653 0.0000035852 0.0000120219 -0.0000011769 -0.0000051035 0.0000047126 0.0000030480 -0.0000303694 -0.0001443739 0.0000029444 0.0000379615 -0.0000345564 -0.0000241141 -0.0000012210 0.0000028261 0.0000008299 -0.0000075630 -0.0000033816 0.0000037800 0.0000081474 -0.0000070033 -0.0000005875 0.0000841106 0.0000374231 -0.0000463906 0.0000066934 0.0000036528 0.0000037843 -0.0000032221 -0.0000022489 -0.0000012393 -0.0000023899 -0.0000026172 -0.0000011734 -0.0000067876 0.0000067950 -0.0000043640 0.0000104982 0.0000112787 0.0000030516 0.0000759232 -0.0000676289 0.0000526364 -0.0000003218 -0.0000201066 0.0000009837 -0.0000073704 -0.0000030268 -0.0000041225 0.0000192236 0.0002395998 0.0000053009 0.0000475930 0.0000257492 0.0000283078 0.0000108932 0.0002094387 0.0000083308 -0.0012068614 -0.0009040604 0.0004709131 0.0003881268 -0.0004991332 0.0005725154 0.0010290508 -0.0008866847 -0.0008546075 -0.0056225699 0.0037082278 -0.0061528905 0.0095474960 -0.0422659298 0.0438030835 0.0246014286 0.0293240787 0.0490769117 0.0315983378 -0.0329999238 -0.0190102022 0.0000055304 -0.0000023059 -0.0000009332 0.0000359251 0.0001315657 0.0000015995 -0.0000044370 -0.0000152921 -0.0000013041 0.0000048816 -0.0000003940 -0.0000021773 -0.0000112699 0.0000084409 0.0000158407 -0.0000229994 -0.0000124547 -0.0000058429 0.0000041910 0.0000013103 0.0000018216 -0.0000008922 -0.0000030450 -0.0000034084 -0.0000017664 0.0000051282 0.0000022871 -0.0000052736 -0.0000103558 -0.0000029838 0.0000222883 -0.0000205901 -0.0000247090 0.0000251665 -0.0000616044 -0.0000269244 -0.0000204724 0.0001908758 0.0001254878 0.0000373247 -0.0001627725 -0.0000752765 -0.0000526064 -0.0001492383 -0.0001266838 0.0009386803 0.0004497570 0.0007483104 -0.0000179686 0.0003240884 0.0005216521 0.0000265307 -0.0000073004 -0.0000523914 -0.0000282647 -0.0000573479 -0.0000125277 -0.0000567798 -0.0000809500 -0.0000237841 -0.0000056012 0.0000056022 0.0000145564 -0.0000218235 0.0000003398 0.0000332271 0.0001075766 0.0001135800 -0.0000114238 0.0001411754 0.0000991226 -0.0000938763 -0.0001485049 -0.0001926410 0.0000058862 0.0002193358 0.0000409922 -0.0003127500 -0.0001694751 -0.0000149841 0.0000071716 0.0000526854 -0.0001191010 -0.0000177412 0.0007344973 0.0004828193 0.0001178458 -0.0000193165 0.0000066130 0.0000003432 -0.0000019311 -0.0000026855 -0.0000083692 -0.0000284707 -0.0000172252 -0.0000147919 0.0002283239 0.0001063383 -0.0002062007 0.0000453116 0.0000367117 0.0000504337 -0.0000104034 -0.0000021694 0.0000100394 0.0002174762 0.0001516075 0.0001108960 -0.0022167052 -0.0009044266 0.0022015716 -0.0004600833 -0.0005451820 -0.0002668254 0.0000942217 0.0000231531 -0.0000538459 0.0000036408 0.0000439470 0.0001703374 0.0003785188 0.0004660696 0.0013615103 -0.0058022447 -0.0075074209 -0.0205615174 -0.0000086441 0.0000078515 0.0000011070 -0.0000734774 0.0000491235 0.0000477791 0.0001298925 -0.0000977157 -0.0000417896 -0.0001293757 -0.0003640538 -0.0000056990 0.0002982432 0.0008245719 0.0000595725 0.0300829170 0.0388992137 0.0125352929 -0.0101915595 0.0222608161 0.0151695599 0.0343821820 0.0627488935 -0.0048142308 -0.0000824854 -0.0000032770 0.0000386368 0.0003169814 0.0002738445 -0.0002419294 -0.0181643944 0.0143396213 0.0205689991 -0.0183294115 -0.4005503624 -0.0183508287 -0.3264680528 -0.0830261558 -0.1509705338 0.1706659770 -0.1255331427 -0.1125563169 0.0005693444 0.0261346898 -0.0701723157 -0.0525160645 -0.1688837991 0.0007744811 -0.1388068139 -0.5883768828 -0.1347709739 -0.2667904009 0.0051030973 -0.1162044327 -0.0050947553 -0.1727251774 0.3078150715 -0.0004744778 0.0003526530 -0.0002205103 0.0015064154 -0.0006250550 0.0027460692 -0.0045041340 -0.0030655914 0.0000211371 0.0000029491 0.0000010687 -0.0000016493 -0.0000038340 0.0000012401 0.0000062876 -0.0000029653 -0.0000037309 -0.0000047129 -0.0000043834 -0.0000008758 0.0000007888 0.0000009655 0.0000026416 0.0000030899 -0.0000052304 -0.0000024007 -0.0000004919 0.0000253276 -0.0000229768 -0.0000731084 0.0000194031 0.0000344438 0.0000234869 0.0000098921 -0.0000000641 -0.0000049943 0.0000243003 -0.0000136276 -0.0000232776 0.0000420746 0.0000573092 0.0000345371 0.0000057979 -0.0000089658 -0.0000088773 -0.0000015825 0.0000062659 0.0000038971 -0.0000478721 -0.0000142875 0.0000071457 0.0000144711 -0.0000029949 0.0000148278 0.0000045774 -0.0000020106 -0.0000074896 0.0000406874 -0.0000094222 0.0001052427 0.0004081655 0.0000201850 -0.0002403308 0.0000416323 -0.0000091379 -0.0001003301 -0.0000550205 0.0000082783 -0.0000914818 -0.0000587288 0.0000937652 0.0001141634 -0.0000043729 0.0000013277 0.0000045031 -0.0000040644 0.0000001737 0.0000008340 0.0000614819 0.0000570984 0.0000302205 0.0000289235 0.0000992175 -0.0000018413 0.0000000089 -0.0000010875 0.0000004946 -0.0000019886 0.0000014633 0.0000009643 -0.0000032569 -0.0000136666 0.0000005430 0.0000031739 -0.0000034947 -0.0000020284 0.0000306194 0.0001423501 -0.0000001531 -0.0000333856 0.0000230994 0.0000226732 -0.0000005549 -0.0000096313 -0.0000005029 -0.0000014011 0.0000007977 0.0000009986 0.0000123747 0.0000967480 0.0000009096 0.0000048806 -0.0000047016 -0.0000024605 -0.0000006869 -0.0000021970 -0.0000009526 0.0000006806 0.0000004556 0.0000013007 -0.0000011565 -0.0000100947 0.0000000996 0.0000078260 -0.0000051040 0.0000047425 0.0000095694 0.0001206456 -0.0000023856 -0.0000669266 0.0000533699 -0.0000439970 -0.0000008479 0.0000011058 -0.0000008132 0.0000063448 0.0000022929 0.0000032544 -0.0000042141 -0.0000345826 -0.0000029582 -0.0000513073 -0.0000340300 -0.0000297417 -0.0000602461 -0.0002634714 0.0000584454 0.0018510597 0.0013445743 -0.0007500751 -0.0005544140 0.0008030468 -0.0009960241 -0.0008871084 0.0007760618 0.0007208979 0.0042151162 -0.0028961720 0.0039456828 -0.0061262481 0.0280941681 -0.0294452940 -0.0172307406 -0.0196165697 -0.0334208498 -0.0259991644 0.0267687038 0.0151285920 0.0000041648 -0.0000061951 -0.0000067840 0.0001434359 0.0004775228 -0.0000047478 -0.0000172742 -0.0000465780 0.0000007869 0.0000156034 -0.0000075440 -0.0000087653 -0.0000724848 0.0000795997 0.0000400737 -0.0000513354 -0.0000193409 -0.0000261303 0.0000107055 0.0000001271 0.0000057779 -0.0000006158 0.0000217092 -0.0000007684 0.0000089416 0.0000077259 0.0000033793 -0.0000228697 -0.0002289541 -0.0000116298 0.0000779004 0.0000480361 0.0000115215 0.0001279554 -0.0000409059 0.0000617930 -0.0001156932 -0.0001941210 -0.0001040441 -0.0000088165 0.0001187353 0.0000687735 -0.0001015344 0.0002963713 0.0002821144 -0.0339923956 -0.0157402432 -0.0161740250 0.0000592493 -0.0014065937 -0.0022388416 -0.0001128858 0.0000511584 0.0002355649 0.0000410874 0.0001955157 -0.0000345246 0.0001808110 0.0002964353 0.0001467259 0.0000284623 -0.0000167610 -0.0000632029 0.0000358465 -0.0000362016 -0.0000683160 -0.0003471201 -0.0001280009 0.0001156276 0.0001258550 -0.0001522039 -0.0003563895 0.0004037233 0.0005094892 -0.0000228700 -0.0002196213 -0.0000171460 0.0004638695 0.0030847890 0.0014222547 0.0009402716 -0.0006101923 -0.0002040653 -0.0000694703 0.0025769822 0.0027787497 0.0013997816 -0.0000438178 -0.0000520581 0.0000571296 -0.0000075753 -0.0000192263 -0.0000397409 0.0000354594 0.0000277045 -0.0000052441 0.0007652235 0.0004236302 -0.0007366738 -0.0002616665 -0.0001802286 -0.0001019163 0.0000440616 0.0000160049 -0.0000195700 -0.0005217921 -0.0004351221 -0.0002329542 -0.0089703607 -0.0037696380 0.0074880481 0.0032321245 0.0028432858 0.0013814885 -0.0003368147 -0.0001963334 0.0002671313 0.0000183236 0.0001001584 0.0001592420 -0.0020562460 -0.0025383539 -0.0069824136 0.0282941982 0.0399423539 0.1053415398 -0.0000034131 0.0000006645 0.0000083981 0.0000301143 0.0004126598 -0.0003047515 0.0000613699 -0.0000166491 -0.0003760416 0.0001619450 -0.0000647478 -0.0000612812 0.0002134504 0.0002481493 0.0000967030 -0.0014232970 0.0064001094 0.0032021498 0.0068829283 0.0154407226 -0.0209266265 0.0189174192 -0.0030535983 0.0214143137 -0.0000810346 -0.0000165162 0.0000111113 0.0001575894 -0.0000506085 -0.0000087361 0.0331003396 -0.0135608021 -0.0284057825 -0.0037588170 -0.0594987579 -0.0021248597 -0.0130981290 -0.0031856419 -0.0061489369 -0.0371341668 0.0290334746 0.0206718280 -0.0049645499 -0.0739859875 0.2304380466 -0.0437228776 -0.1439491913 -0.0027926898 -0.0102178815 -0.0534708451 -0.0094564220 -0.2238412296 -0.0023013058 -0.0937488456 0.0066163152 0.0912751545 -0.1537374021 -0.0004946558 0.0015290139 -0.0001574411 0.0000638808 0.0000281488 0.0001505242 -0.0011068880 -0.0007372738 0.0000067987 0.0000166532 0.0000094063 -0.0000073615 -0.0000134670 -0.0000014034 -0.0000010521 0.0000094180 -0.0000036627 -0.0000082752 -0.0000165352 -0.0000046392 0.0000040344 0.0000083015 -0.0000000462 -0.0000022812 -0.0000176560 -0.0000132263 -0.0000097678 0.0000516393 0.0000266545 0.0000551662 0.0000415899 0.0000014486 0.0000856173 0.0000380258 0.0000072338 0.0000185654 0.0000168423 -0.0000214579 0.0000226390 0.0001517180 0.0001554154 0.0000879909 0.0000041273 0.0000011782 0.0000034524 0.0000117246 -0.0000066649 -0.0000353539 0.0000005125 0.0000204450 -0.0000010549 0.0000130479 0.0000146426 0.0000071411 0.0000007037 0.0000019094 -0.0000053913 -0.0000254885 -0.0000260685 -0.0000381752 0.0001495172 0.0001841841 0.0000498840 0.0000227754 -0.0000182524 0.0000170928 -0.0001533361 -0.0000362394 -0.0000490127 0.0000082897 0.0000210574 0.0000485124 -0.0000068698 -0.0000000471 -0.0000059872 -0.0000195282 -0.0000026237 -0.0000175793 -0.0000052188 0.0000054471 -0.0000079052 0.0000128087 0.0000405238 -0.0000138318 0.0000045563 -0.0000031372 -0.0000036518 -0.0000073118 0.0000071009 0.0000032927 -0.0000065958 -0.0000173706 0.0000004621 0.0000077441 -0.0000075775 -0.0000069588 0.0000624129 0.0002212252 -0.0000139852 -0.0000488368 0.0000701021 0.0000237819 0.0000034700 0.0000071670 -0.0000027994 0.0000204619 0.0000086802 -0.0000125814 -0.0000339060 -0.0000808711 0.0000080658 -0.0002215588 -0.0000768958 0.0001171400 -0.0000036500 -0.0000042462 -0.0000027387 0.0000011690 0.0000014310 0.0000012605 0.0000013709 -0.0000025950 0.0000002883 0.0000064282 -0.0000049632 0.0000033426 0.0000000041 0.0000560621 -0.0000129122 -0.0000532076 0.0000552460 -0.0000459751 0.0000004364 0.0000211105 -0.0000010899 0.0000094382 0.0000031286 0.0000046713 -0.0000295731 -0.0002478756 -0.0000027443 -0.0000680566 -0.0000314461 -0.0000412565 0.0010514694 0.0000358045 -0.0000475536 -0.0061101084 -0.0053008334 0.0025429810 0.0003133657 0.0023441237 -0.0008835994 -0.0033840139 0.0027079080 0.0014621557 -0.0532395942 0.0396943797 -0.0447600710 0.0777385217 -0.3501573087 0.3642260004 0.2028661206 0.2230605796 0.3806834419 0.3523455645 -0.3611485827 -0.2025145215 0.0000051856 -0.0000050117 -0.0000035272 0.0000647295 0.0002047198 -0.0000039473 -0.0000082386 -0.0000203652 0.0000004171 0.0000085564 -0.0000049798 -0.0000049847 -0.0000396888 0.0000402458 0.0000262271 -0.0000435604 -0.0000213267 -0.0000204246 0.0000085013 0.0000007310 0.0000050869 0.0000000682 0.0000261082 0.0000011598 0.0000040457 0.0000034691 0.0000033508 -0.0000121862 -0.0002585867 -0.0000132565 0.0000576113 0.0000193805 -0.0000106201 0.0000737049 -0.0000489393 0.0000126721 -0.0000739410 0.0000090256 0.0000208735 0.0000071932 -0.0000182124 -0.0000126145 -0.0000579858 0.0000616777 0.0000625266 -0.0127915827 -0.0059202184 -0.0060469055 0.0000159880 -0.0004309299 -0.0006881534 -0.0000361681 0.0000158261 0.0000739460 0.0000066629 0.0000589831 -0.0000166728 0.0000534090 0.0000893675 0.0000495419 0.0000113107 -0.0000035007 -0.0000208499 0.0000061179 -0.0000142081 -0.0000127549 -0.0001006574 -0.0000045547 0.0000432139 0.0000913326 -0.0000275797 -0.0001658781 0.0000897180 0.0001127041 -0.0000099038 0.0000036407 0.0000138782 0.0000472898 0.0011518155 0.0005437233 0.0003603929 -0.0002126549 -0.0000837677 -0.0000383657 0.0009379232 0.0010610370 0.0005229407 -0.0000272594 -0.0000271146 0.0000333284 -0.0000078829 -0.0000083325 0.0000066579 0.0000371754 0.0000251490 0.0000114851 0.0004866431 0.0002594700 -0.0004825282 0.0000755258 0.0000570519 0.0000753456 0.0000250763 0.0000073646 -0.0000217609 -0.0004766822 -0.0003694050 -0.0002038682 -0.0054553387 -0.0023274536 0.0047947721 -0.0006228623 -0.0007815302 -0.0004356830 -0.0002714560 -0.0001451969 0.0002294590 -0.0000041461 -0.0000228659 -0.0000348432 -0.0006896841 -0.0008520042 -0.0023161251 0.0092023972 0.0133680788 0.0349365897 0.0000014354 -0.0000041527 0.0000027986 0.0000122083 0.0001798684 -0.0001035553 -0.0000885877 -0.0000916523 -0.0002109808 0.0002200799 0.0001164748 0.0001335140 -0.0003411320 0.0000691228 -0.0004277386 -0.0043299336 -0.0021503790 -0.0002329054 -0.0077289758 0.0039887105 0.0148017186 -0.0496660285 0.0231477629 -0.0657549324 0.0000205471 0.0000090228 -0.0000037161 0.0003074565 -0.0006498618 0.0005792879 0.0152642739 -0.0069680283 -0.0133963787 0.0003096417 0.0239661956 0.0014853228 0.0369653752 0.0094784147 0.0179217768 0.0964778412 -0.0729543672 -0.0632135067 0.0027050590 0.0384712770 -0.1151262362 -0.0051938407 -0.0147125901 0.0014166850 0.0000643294 0.0299108582 -0.0018205311 0.6181877875 0.0077703106 0.2582158015 -0.0218329477 -0.3141838783 0.5337187389 -0.0015098049 0.0057175571 -0.0008689875 -0.0038349849 0.0005033928 -0.0063089993 0.0011581952 0.0005232485 0.0001845711 0.0000067966 0.0000040594 -0.0000033156 -0.0000057748 0.0000002917 0.0000023203 0.0000051348 0.0000005842 -0.0000010154 -0.0000070775 -0.0000026075 0.0000010900 0.0000043912 0.0000009579 -0.0000009215 -0.0000102599 -0.0000075942 -0.0000055357 0.0000286568 0.0000038070 -0.0000058459 -0.0000006054 -0.0000248508 0.0000016101 0.0000165579 0.0000013968 0.0000017337 0.0000113865 -0.0000129042 0.0000091910 0.0000903436 0.0000973041 0.0000605219 -0.0000063696 -0.0000034595 -0.0000104397 -0.0000081046 0.0000135054 0.0000333185 -0.0000142888 0.0000019352 -0.0000070234 0.0000109278 -0.0000047625 -0.0000103604 -0.0000076173 0.0000134678 0.0000059061 0.0000776543 0.0000053256 0.0001333111 0.0002092988 -0.0001547867 -0.0002634434 0.0000070891 -0.0000051433 -0.0000429640 -0.0000244757 0.0000009289 0.0000485958 0.0000391672 -0.0000735656 -0.0000624687 -0.0000042353 0.0000009740 0.0000011713 -0.0000073309 -0.0000003082 -0.0000046879 0.0000018580 -0.0000019797 0.0000162571 -0.0000111856 0.0000030386 0.0000233195 0.0000022265 -0.0000016126 -0.0000014596 -0.0000027849 0.0000044682 0.0000011964 -0.0000022915 -0.0000055490 0.0000003408 0.0000025487 -0.0000024700 -0.0000022882 0.0000225763 0.0000786590 -0.0000057134 -0.0000102868 0.0000201382 0.0000028594 0.0000016514 0.0000030365 -0.0000012816 0.0000105439 0.0000043523 -0.0000061963 -0.0000167386 -0.0000427883 -0.0000023948 -0.0001132406 -0.0000399499 0.0000599331 -0.0000035180 -0.0000023500 -0.0000019979 0.0000017009 0.0000011135 0.0000005524 0.0000025626 0.0000123764 -0.0000000648 0.0000010558 -0.0000022672 0.0000005813 -0.0000150447 -0.0001201584 0.0000087737 -0.0000167974 0.0000222342 -0.0000171242 0.0000006576 0.0000165289 -0.0000004695 0.0000029696 0.0000008993 0.0000016429 -0.0000173941 -0.0001855792 -0.0000033463 -0.0000132197 -0.0000022188 -0.0000102477 0.0004732624 0.0000708640 -0.0000887210 -0.0031117912 -0.0025752020 0.0012838167 0.0003163019 0.0005500119 0.0000621660 -0.0015419056 0.0012739582 0.0007575931 -0.0207254642 0.0155563392 -0.0171064415 0.0299104269 -0.1350514929 0.1405627400 0.0783294689 0.0854857536 0.1461833565 0.1383985920 -0.1416946399 -0.0792801618 0.0000111848 -0.0000104864 -0.0000047071 0.0000663716 0.0002262944 -0.0000055095 -0.0000095689 -0.0000226498 0.0000004722 0.0000126805 -0.0000070003 -0.0000072456 -0.0000530309 0.0000468485 0.0000421759 -0.0000783363 -0.0000432900 -0.0000347588 0.0000131371 0.0000005209 0.0000097314 -0.0000002499 0.0000442665 0.0000018422 0.0000031322 0.0000030861 0.0000054204 -0.0000091647 -0.0004308846 -0.0000104456 0.0000989302 0.0000076488 -0.0000506116 0.0000977758 -0.0001145479 -0.0000294627 -0.0001043786 0.0002380870 0.0001850976 0.0000668314 -0.0002023936 -0.0001383547 -0.0000967760 -0.0001198653 -0.0001168400 -0.0052145157 -0.0023902027 -0.0022613815 -0.0000125863 0.0002453300 0.0003695587 0.0000038884 -0.0000139484 -0.0000311559 -0.0000282004 -0.0000216763 -0.0000198396 -0.0000265705 -0.0000379084 -0.0000002236 0.0000016822 0.0000023780 -0.0000023279 -0.0000227111 -0.0000055589 0.0000432773 0.0000633007 0.0001634249 0.0000203172 0.0001924385 0.0000903028 -0.0001796912 -0.0001301173 -0.0001694578 -0.0000060514 0.0003189132 0.0000894840 -0.0004250811 0.0004367107 0.0002571585 0.0001462829 -0.0000928212 -0.0001260078 -0.0000065726 0.0011254411 0.0009728363 0.0003553555 -0.0000170825 -0.0000037800 0.0000308019 -0.0000017714 0.0000122962 0.0000436568 -0.0000333587 -0.0000134338 0.0000130378 0.0006780310 0.0003411189 -0.0006844390 0.0004437887 0.0002595333 0.0003122835 -0.0000189765 -0.0000113820 -0.0000155270 -0.0000394602 -0.0000163147 0.0000302267 -0.0073835262 -0.0030512150 0.0068570835 -0.0046101890 -0.0046110004 -0.0025057610 0.0000182108 -0.0000195686 -0.0000190115 -0.0000071595 -0.0001335039 -0.0003964170 -0.0000137505 -0.0000206202 0.0000615074 -0.0010292282 0.0001223944 -0.0009870400 0.0000051520 -0.0000130487 0.0000049043 -0.0000731037 0.0001621692 -0.0000242851 0.0000614355 -0.0001191045 -0.0002905923 0.0001903279 0.0002803768 0.0000783300 -0.0003131767 -0.0004209679 0.0003809282 -0.0015704801 0.0002164548 0.0004036684 -0.0318512412 -0.0243775617 0.0772412230 0.0082937018 -0.0151284261 0.0180742523 -0.0000183029 0.0000135079 0.0000169008 -0.0000045628 0.0001339136 -0.0001131502 0.0108787081 -0.0047904634 -0.0100480364 -0.0001505466 0.0011509291 0.0000530026 0.0072711687 0.0019302894 0.0031762672 0.2886106265 -0.2220708779 -0.1846126925 0.0136157331 0.2452873245 -0.7520110880 0.0817490639 0.2739972693 0.0093049003 0.0197260861 0.0766430569 0.0201543479 -0.1227210022 -0.0026398791 -0.0516417895 0.0072193114 0.1084649761 -0.1868431652 0.0002015435 -0.0008811058 0.0001495533 0.0007909131 -0.0000871276 0.0012927855 -0.0007938222 -0.0005015873 -0.0000429049 0.0000019491 0.0000045017 -0.0000009228 -0.0000013758 -0.0000002134 0.0000000189 -0.0000002295 -0.0000021951 -0.0000026025 -0.0000036229 -0.0000010730 0.0000006873 0.0000085375 -0.0000029498 -0.0000084146 -0.0000113265 -0.0000111082 -0.0000071667 0.0000007899 0.0000089670 -0.0000010147 0.0000126910 0.0000102607 0.0000065743 0.0000139101 0.0000039002 0.0000009544 -0.0000395689 0.0000449022 0.0000913481 0.0001011105 0.0001478542 0.0000838158 -0.0000237501 -0.0000151668 -0.0000530083 -0.0000422315 0.0000460300 0.0001335694 -0.0000357566 -0.0000344485 -0.0000018376 0.0000273768 -0.0000243644 -0.0000239515 -0.0000190755 0.0000258221 0.0000036643 0.0002520874 0.0000556795 0.0005393578 0.0000316765 -0.0007604525 -0.0005390857 0.0000115067 0.0000116013 -0.0000846366 0.0000257344 -0.0000305506 -0.0000073493 0.0000375650 -0.0001125464 -0.0000695182 -0.0000037499 -0.0000013951 0.0000015938 -0.0000066660 -0.0000009684 -0.0000026584 0.0000054406 0.0000039356 0.0000220984 -0.0000441083 -0.0000398778 0.0000505562 0.0000019285 -0.0000017106 -0.0000012865 -0.0000028349 0.0000063717 0.0000016318 -0.0000045613 -0.0000124983 0.0000010434 0.0000070687 -0.0000061365 -0.0000049583 0.0000365817 0.0001630226 -0.0000077785 -0.0000499412 0.0000547660 0.0000283001 0.0000028567 0.0000083336 -0.0000010407 0.0000140395 0.0000048717 -0.0000079301 -0.0000300298 -0.0001097998 0.0000102377 -0.0001456464 -0.0000576888 0.0000776022 -0.0000075477 -0.0000026776 -0.0000039246 0.0000037300 0.0000017233 0.0000006255 0.0000020145 -0.0000093001 0.0000022984 0.0000037982 -0.0000037358 0.0000020641 -0.0000061209 0.0001104455 -0.0000348719 -0.0000473771 0.0000422480 -0.0000362808 0.0000005895 0.0000175710 -0.0000009243 0.0000036415 0.0000019024 0.0000017663 -0.0000154808 -0.0001989419 -0.0000022598 -0.0000144630 -0.0000060301 -0.0000107485 0.0003657102 -0.0001933368 -0.0000129822 -0.0009999619 -0.0010004191 0.0004567567 -0.0003737200 0.0014390280 -0.0010782410 -0.0021426297 0.0017629553 0.0013052619 -0.0129850971 0.0100892453 -0.0097142998 0.0178785139 -0.0809453490 0.0842499578 0.0465363629 0.0496535095 0.0854785874 0.0907451665 -0.0925037322 -0.0515468015 -0.0000244632 0.0000629194 0.0000513354 -0.0016380184 -0.0063456821 -0.0001730765 0.0001841160 0.0005857434 -0.0000098690 -0.0001277549 0.0000660050 0.0000738217 0.0006176888 -0.0006574192 -0.0003593934 0.0005013253 0.0002364642 0.0002402639 -0.0001059865 0.0000014986 -0.0000634715 -0.0000071337 -0.0003045881 -0.0000066174 -0.0000625356 -0.0000497831 -0.0000327614 0.0001968487 0.0031725805 0.0001438506 -0.0006893318 -0.0003591561 0.0000095513 -0.0011062260 0.0004135731 -0.0004641949 0.0013236580 0.0011875820 0.0007001982 -0.0000775820 -0.0008744045 -0.0005282964 -0.0004951227 -0.0009237626 -0.0020956500 0.4043020133 0.1848282053 0.1735295485 -0.0007796863 0.0218919230 0.0333237139 0.0008953462 -0.0011817444 -0.0030771962 -0.0002233194 -0.0016359461 -0.0002194446 -0.0021465648 -0.0031329997 -0.0007476054 0.0004965540 0.0009670877 0.0003324060 -0.0014004886 0.0002023176 0.0026708414 0.0037657944 0.0051691481 -0.0001686027 0.0068719312 0.0044804829 -0.0057203689 -0.0137547223 -0.0170584619 -0.0005199599 0.0159202100 0.0046552065 -0.0232189903 -0.0331437159 -0.0149342399 -0.0123907649 0.0078521686 0.0056432166 0.0030632823 -0.0702817613 -0.0523605115 -0.0295841443 -0.0001088430 -0.0000973346 -0.0003829601 -0.0000196988 -0.0000576098 -0.0001757180 -0.0001344455 -0.0001156523 -0.0000116534 -0.0006371953 -0.0003417207 0.0006510790 0.0000384871 0.0000103302 -0.0000697396 0.0000919186 0.0000568642 -0.0000704601 0.0016331318 0.0012897102 0.0010177959 0.0070513455 0.0029060202 -0.0075155210 -0.0005196056 -0.0002861815 0.0001867792 -0.0010715323 -0.0005217089 0.0009505454 0.0000638067 0.0004706827 0.0019831564 0.0142964988 0.0172722283 0.0506811726 -0.2311597881 -0.2794755361 -0.7703431273 0.0000013085 0.0000430773 -0.0000131415 0.0006621934 -0.0006333774 -0.0002238256 -0.0005793378 0.0001196586 0.0006811790 -0.0000051060 -0.0002128758 -0.0002049375 -0.0000165239 0.0000964777 -0.0000130108 -0.0017808412 0.0009559232 0.0009161737 0.0016199639 -0.0014709698 -0.0023797985 -0.0001012495 0.0000594787 -0.0001667589 0.0002356656 0.0001145450 -0.0000467278 0.0002415940 -0.0002474466 0.0006046896 0.0152610961 -0.0064780792 -0.0135897161 -0.0007373267 -0.0072960610 -0.0001117947 0.0069612054 0.0019667148 0.0032786530 -0.0214205187 0.0155012080 0.0130344228 -0.0002571815 -0.0050724812 0.0153237419 0.0020529906 0.0067163775 -0.0002196605 -0.0000742897 -0.0003369845 -0.0001474979 0.0015096885 0.0000529691 0.0006269777 -0.0001194281 -0.0007691780 0.0014700738 -0.0005094560 0.0021812178 -0.0004464852 -0.0034988817 0.0006479017 -0.0062154123 0.0005336732 0.0003007761 -0.0000275172 -0.0000987562 -0.0000828092 0.0000120872 0.0000653209 0.0000441014 0.0001093958 -0.0000962588 -0.0000206287 -0.0000129366 0.0000764537 0.0000091408 -0.0000263867 -0.0000201691 0.0000220979 0.0000154238 0.0001218772 0.0001455130 0.0001378669 0.0000482044 -0.0004906573 -0.0016513653 0.0002424194 0.0003798389 -0.0003501543 -0.0001061567 -0.0000749766 -0.0001011539 0.0000467860 -0.0000535273 0.0001386701 -0.0013203205 -0.0016437142 -0.0010959820 0.0000537563 -0.0000024379 0.0000962823 -0.0000304680 0.0000205115 -0.0000013830 0.0000488325 -0.0000226983 0.0000088686 -0.0000817470 0.0000256757 -0.0000597716 0.0001158996 -0.0001736043 -0.0001465824 -0.0004000546 0.0000548008 -0.0008429801 0.0000665166 -0.0000446360 -0.0000865095 -0.0000825405 0.0000409877 -0.0000725306 0.0003668335 -0.0000284551 0.0004767489 -0.0009451552 0.0018004087 0.0014019495 0.0000069118 0.0000229616 0.0000570508 0.0000654348 0.0000490037 0.0000931149 0.0000358842 -0.0000127080 0.0000508523 0.0000194751 -0.0000158028 0.0000144366 -0.0000342747 0.0000216857 0.0000245526 0.0000488901 -0.0000645620 -0.0000321794 0.0001199870 0.0004053264 -0.0000172485 -0.0000780134 0.0000553547 0.0000572279 -0.0011609991 -0.0047714673 0.0000180370 0.0003834311 -0.0004344542 -0.0003212619 -0.0000197450 -0.0000073152 0.0000167460 -0.0001410469 -0.0000590767 0.0000811952 0.0001481754 0.0002696632 -0.0001083092 0.0014732855 0.0006138246 -0.0008873530 0.0000415762 0.0000344477 0.0000250041 -0.0000171784 -0.0000111920 -0.0000114144 -0.0000124998 0.0000147300 -0.0000056913 -0.0000958034 0.0000850220 -0.0000605925 0.0000508043 -0.0003021435 0.0000074196 0.0010270503 -0.0008938079 0.0006603991 -0.0000067649 -0.0001956833 0.0000073524 -0.0000731777 -0.0000288674 -0.0000390248 0.0002296726 0.0023013211 0.0000015747 0.0005362396 0.0002718451 0.0002665310 -0.0032023829 -0.0013962203 0.0017089107 0.0299904520 0.0214195815 -0.0114660119 -0.0022034053 0.0041144618 -0.0028758994 0.0104643336 -0.0092556692 -0.0068551363 -0.0063886784 -0.0012623876 -0.0132325971 0.0114253888 -0.0496860982 0.0491146085 0.0608086604 0.0675961895 0.1164718467 0.0024318137 -0.0046009749 -0.0086368771 0.0000000043 -0.0000022030 -0.0000008708 0.0000068072 0.0000406230 0.0000020257 -0.0000012767 -0.0000024582 0.0000009922 0.0000015187 -0.0000012916 -0.0000009402 -0.0000093657 0.0000085571 0.0000042782 -0.0000094926 -0.0000048308 -0.0000057014 0.0000014628 -0.0000012132 0.0000017117 0.0000008753 0.0000129738 0.0000011221 0.0000011105 0.0000000192 0.0000004724 -0.0000060788 -0.0001307656 -0.0000061062 0.0000146058 0.0000094427 -0.0000015450 0.0000155317 -0.0000035756 0.0000047218 -0.0000212227 -0.0000207031 -0.0000093634 0.0000033901 0.0000161691 0.0000052821 0.0000165313 0.0000191139 0.0000259067 -0.0033997217 -0.0016007071 -0.0014741102 0.0000120668 -0.0001631018 -0.0002521757 -0.0000091498 0.0000036884 0.0000263886 -0.0000089987 0.0000401683 0.0000117541 0.0000327887 0.0000385624 0.0000000754 -0.0000040674 -0.0000140504 -0.0000085054 0.0000014378 0.0000080420 -0.0000329947 -0.0000582393 -0.0000635568 -0.0000066053 -0.0001475044 -0.0000795098 0.0001490238 0.0001618667 0.0002044707 0.0000143107 -0.0001645989 -0.0000420218 0.0002633431 0.0002802978 0.0001105714 0.0001185420 0.0000064997 0.0000128167 -0.0000694603 -0.0004004385 0.0000768578 -0.0000287771 -0.0000547244 -0.0000602104 0.0001595028 0.0000162904 0.0000689404 0.0000580520 0.0008881207 0.0004653579 0.0003066419 -0.0000086386 0.0000112801 -0.0000678778 -0.0000267801 -0.0000038168 0.0000184703 -0.0001284503 -0.0001349188 0.0000488826 -0.0080520114 -0.0060636320 -0.0036979939 -0.0003247275 -0.0001117041 0.0003452674 0.0003799292 0.0002742139 0.0001918263 0.0013632651 0.0007060536 -0.0013715385 0.0000348000 -0.0001882708 -0.0007729098 -0.0001535599 -0.0001858015 -0.0005641644 0.0026298469 0.0030631232 0.0086098597 0.0000012387 -0.0000021724 0.0000011780 0.0000157645 -0.0000950525 0.0001829882 0.0001068073 0.0000917265 -0.0003104819 0.0000247833 0.0001963808 -0.0001535522 0.0000392341 -0.0000138577 0.0000272078 -0.0004636021 0.0003325739 0.0002846794 -0.0000810295 0.0000372294 0.0001017379 0.0005331816 -0.0001094928 0.0005720288 -0.0001538740 0.0003863646 -0.0003092231 0.0320897048 -0.0692974562 0.0578803892 0.0044257138 -0.0019336504 -0.0038904647 -0.0002707156 -0.0026714993 -0.0000731122 0.0011897300 0.0004994083 0.0003581440 0.0008248266 -0.0006630813 -0.0005432817 -0.0000234929 0.0002370878 -0.0008270528 0.0000300532 0.0000438628 0.0000229587 -0.0003659527 -0.0020129411 -0.0003314716 -0.0073704337 -0.0010436625 -0.0032456922 0.0003366322 0.0024271114 -0.0039608595 -0.1811669729 0.6618930298 -0.0973969220 -0.3481901160 0.0583056448 -0.5906298174 0.1463627689 0.0987930043 0.0083295799 -0.0000014114 0.0000006507 0.0000012168 0.0000055895 -0.0000028620 -0.0000113036 0.0000015627 0.0000020898 0.0000048499 0.0000028314 0.0000003432 0.0000000324 0.0000018396 -0.0000029937 -0.0000074934 0.0000024279 -0.0000003597 -0.0000008079 -0.0000503652 0.0000431853 0.0001326796 -0.0000255096 -0.0000238319 -0.0000027475 -0.0000142281 0.0000000821 0.0000033001 -0.0000454282 0.0000227771 0.0000526316 -0.0000114643 -0.0000090664 -0.0000154274 -0.0000054635 0.0000009947 -0.0000068108 0.0000011617 0.0000005434 0.0000033795 -0.0000034257 0.0000026423 -0.0000012864 0.0000041249 -0.0000010548 0.0000030324 -0.0000040981 0.0000044784 0.0000015158 0.0000394566 0.0000035163 0.0000780984 0.0000134756 -0.0000112188 -0.0000065011 0.0000162359 -0.0000061182 0.0000039686 -0.0000152193 -0.0000132158 -0.0000458875 0.0000197018 -0.0000436271 -0.0000274043 0.0000069383 -0.0000019949 -0.0000037090 0.0000078745 0.0000001237 -0.0000000369 -0.0000069343 0.0000003614 -0.0000041806 -0.0000063824 0.0000026806 0.0000013779 0.0000002403 0.0000001254 -0.0000006644 -0.0000001689 0.0000008711 0.0000002744 -0.0000027086 -0.0000075845 0.0000004723 0.0000039982 -0.0000030238 -0.0000027378 0.0000206784 0.0000945303 -0.0000018451 -0.0000312891 0.0000330927 0.0000204697 0.0000001520 0.0000020585 0.0000000222 0.0000062948 0.0000019758 -0.0000036724 -0.0000046012 -0.0000284519 -0.0000010514 -0.0000629398 -0.0000259229 0.0000354241 -0.0000014350 0.0000001478 -0.0000007458 0.0000005390 0.0000002216 0.0000000476 0.0000009193 0.0000023719 0.0000002503 0.0000022705 -0.0000025698 0.0000014251 -0.0000041523 -0.0000295951 -0.0000018652 -0.0000296646 0.0000241713 -0.0000205073 0.0000006053 0.0000067164 -0.0000001022 0.0000001538 -0.0000000200 0.0000000081 -0.0000059534 -0.0000758857 -0.0000004824 0.0000039819 0.0000011709 0.0000013435 -0.0058882367 -0.0002978223 0.0034321017 0.0409045464 0.0294839074 -0.0157134089 -0.0021707623 0.0028346016 -0.0026147172 0.0315580207 -0.0289660414 -0.0228567317 0.0003464505 -0.0007455052 -0.0002923865 -0.0003959764 0.0023437290 -0.0025184348 0.0017012256 0.0014468619 0.0028108895 -0.0051171855 0.0055187739 0.0030129225 0.0000006980 -0.0000037717 -0.0000025571 0.0000896157 0.0003603719 0.0000091101 -0.0000098132 -0.0000322672 0.0000005569 0.0000062338 -0.0000037622 -0.0000036083 -0.0000313364 0.0000323546 0.0000173094 -0.0000233271 -0.0000110599 -0.0000122693 0.0000046865 -0.0000003982 0.0000032139 0.0000013298 0.0000252650 0.0000017515 0.0000031042 0.0000010003 0.0000011988 -0.0000151490 -0.0002595458 -0.0000090603 0.0000373867 0.0000220081 -0.0000031752 0.0000538865 -0.0000180311 0.0000210703 -0.0000644036 -0.0000686274 -0.0000334081 0.0000021981 0.0000474000 0.0000202473 0.0000353240 0.0000679640 0.0000956730 -0.0155333547 -0.0074249371 -0.0067512845 0.0000394942 -0.0004240282 -0.0006985703 -0.0000126028 -0.0000101750 0.0001160141 -0.0002031976 0.0003074462 0.0000194316 0.0001475752 0.0001332971 -0.0000027692 0.0000404536 -0.0000358641 -0.0000668658 -0.0000857646 0.0001443221 -0.0002028211 -0.0003760216 -0.0002103055 -0.0000921374 -0.0005616092 -0.0003245930 0.0005737265 0.0001668291 0.0002166731 0.0000095304 -0.0006305885 -0.0003066343 0.0012509539 0.0014639838 0.0005237999 0.0004937997 -0.0005311352 -0.0003424586 -0.0000771930 0.0041414032 0.0044864159 0.0010345982 0.0000382684 0.0000115218 0.0000058298 -0.0000065369 -0.0000032423 0.0000196786 0.0000681649 0.0000747815 0.0000410715 0.0001421517 0.0000793249 -0.0001260672 0.0000081935 0.0000100818 0.0000031211 -0.0000121523 -0.0000017020 0.0000129461 -0.0009185549 -0.0008444498 -0.0005352261 -0.0017122790 -0.0008197597 0.0015196518 0.0000132808 -0.0000050630 0.0000042808 0.0001944216 0.0001143355 -0.0001557965 0.0000029832 -0.0000458021 -0.0001790128 -0.0006670643 -0.0008125990 -0.0024940362 0.0118896197 0.0135569374 0.0381992832 0.0000027998 -0.0000030355 0.0000038390 -0.0002889077 -0.0000064859 0.0005546078 -0.0007635558 -0.0003879937 -0.0003986679 0.0001123911 0.0000160005 -0.0000046758 0.0000069588 -0.0000079889 0.0000240437 0.0033727098 -0.0019918662 -0.0018468799 -0.0002063351 0.0001579439 0.0002608106 -0.0000946795 -0.0000223824 -0.0000746766 0.0001820515 0.0002553857 0.0002546871 -0.0023215186 0.0047698841 -0.0044005155 -0.0305729908 0.0130149363 0.0268293222 0.0013189908 0.0146226296 0.0004797959 -0.0112082574 -0.0032503002 -0.0054816671 0.0025727678 -0.0020246547 -0.0017437137 -0.0000054926 0.0005683251 -0.0017682108 -0.0002205957 -0.0006395584 0.0000040128 0.0001507387 0.0005827565 0.0001244059 0.0010917094 0.0000401789 0.0004951291 -0.0000347462 -0.0002377482 0.0003391829 0.0123012056 -0.0453115007 0.0066975336 0.0264299383 -0.0044252782 0.0456851265 -0.0100128651 -0.0066633283 -0.0005596421 0.0000034907 0.0000044515 0.0000012923 0.0000058414 -0.0000083026 -0.0000251729 0.0000031118 0.0000012248 -0.0000015446 -0.0000013571 0.0000002271 0.0000024766 0.0000004329 -0.0000029160 -0.0000050733 -0.0000055852 -0.0000085478 -0.0000104896 -0.0000898102 0.0000894271 0.0003092680 -0.0000035127 -0.0000152137 0.0000561637 -0.0000053597 0.0000010232 -0.0000023862 -0.0000218106 0.0000067978 0.0000128775 0.0000764483 0.0000915235 0.0000695903 -0.0000049404 -0.0000007398 -0.0000092170 0.0000002164 0.0000019075 0.0000034389 -0.0000074976 0.0000041410 0.0000000370 0.0000053623 -0.0000033548 0.0000016112 -0.0000091017 0.0000096197 0.0000059052 0.0000404853 -0.0000021046 0.0000837019 0.0000167324 -0.0000297557 -0.0000329844 0.0000026022 0.0000034673 0.0000113507 0.0000194558 0.0000349868 -0.0000012514 0.0000716086 -0.0000997186 -0.0000725193 0.0000016141 -0.0000008301 -0.0000008974 0.0000039792 -0.0000025698 -0.0000003453 -0.0000013952 0.0000004583 -0.0000056340 -0.0000007751 -0.0000048911 -0.0000044171 0.0000019973 -0.0000009025 -0.0000016940 -0.0000018195 0.0000035342 0.0000012862 -0.0000061524 -0.0000200244 0.0000006811 0.0000032559 -0.0000019829 -0.0000026300 0.0000583909 0.0002406085 -0.0000033192 -0.0000092355 0.0000142688 0.0000081267 0.0000004758 0.0000008147 -0.0000006461 0.0000119616 0.0000046887 -0.0000070738 -0.0000056161 -0.0000183311 0.0000013071 -0.0001249749 -0.0000499069 0.0000741662 -0.0000022146 -0.0000012411 -0.0000009872 0.0000011243 0.0000003270 0.0000006325 0.0000013740 0.0000054281 0.0000001403 0.0000056135 -0.0000055337 0.0000036854 -0.0000092529 -0.0000582922 0.0000060308 -0.0000679652 0.0000566209 -0.0000430358 0.0000005400 0.0000086932 -0.0000001148 0.0000009003 0.0000005037 0.0000006106 -0.0000092448 -0.0001000835 0.0000039941 -0.0000004882 -0.0000014269 0.0000029966 -0.0817130921 -0.0029656469 0.0455450959 0.5623799118 0.4080199681 -0.2166672143 -0.0196679411 0.0197676050 -0.0142891276 0.4354569004 -0.3982035749 -0.3146792254 0.0003327734 -0.0033714166 -0.0047004075 0.0016182278 -0.0045457544 0.0045844682 0.0212375056 0.0210056381 0.0377165715 -0.0222849166 0.0246844295 0.0130747777 0.0000000410 0.0000016319 0.0000009325 -0.0000322074 -0.0001387897 -0.0000032800 0.0000036725 0.0000118818 -0.0000003852 -0.0000018057 0.0000018633 0.0000013728 0.0000116171 -0.0000115992 -0.0000061605 0.0000114325 0.0000065536 0.0000069083 -0.0000018339 0.0000003852 -0.0000019631 -0.0000009058 -0.0000144822 -0.0000021904 -0.0000008580 0.0000001217 -0.0000016765 0.0000030374 0.0001375818 0.0000012095 -0.0000157697 -0.0000110103 0.0000011934 -0.0000204628 0.0000050459 -0.0000080645 0.0000288074 0.0000289783 0.0000144894 -0.0000015241 -0.0000235329 -0.0000093827 -0.0000220392 -0.0000185183 -0.0000388355 0.0071142781 0.0032748720 0.0029856605 -0.0000169247 0.0005343102 0.0008134282 0.0000168959 -0.0000299311 -0.0000743381 0.0000044727 -0.0000415159 -0.0000107217 -0.0000583347 -0.0000670327 0.0000032567 0.0000171731 0.0000312341 0.0000092839 -0.0000382132 -0.0000095409 0.0000807041 0.0000904100 0.0001269082 0.0000062440 0.0003175308 0.0001543221 -0.0003250125 -0.0003837595 -0.0004811521 -0.0000158014 0.0005170807 0.0001615496 -0.0007321500 -0.0006100956 -0.0002596784 -0.0001980900 0.0001730030 0.0000434360 0.0000581925 -0.0010589520 -0.0007701545 -0.0005053342 -0.0000074181 0.0000011499 -0.0000056984 -0.0000005407 0.0000006268 0.0000007507 -0.0000060335 -0.0000062389 -0.0000028067 0.0000523792 0.0000275306 -0.0000453700 -0.0000139781 -0.0000121695 -0.0000050558 0.0000054122 0.0000019122 -0.0000042199 0.0000479428 0.0000435392 0.0000379974 -0.0005988698 -0.0002476777 0.0004660394 0.0001836557 0.0001451995 0.0000719159 -0.0000675608 -0.0000415579 0.0000597626 0.0000015451 -0.0000040410 -0.0000239955 0.0002498092 0.0002884147 0.0009007864 -0.0043109792 -0.0048731740 -0.0137849739 -0.0000015515 0.0000046840 -0.0000050491 0.0000595966 0.0001250246 -0.0001371823 0.0000444391 -0.0000370157 -0.0000931699 -0.0000264569 0.0002002624 -0.0000266671 0.0003659520 -0.0003382858 0.0001035684 0.0712911416 -0.0416125000 -0.0387884252 -0.0001545371 -0.0003985842 0.0001032790 -0.0000433089 0.0000937911 -0.0000238347 -0.0000110015 -0.0000032340 -0.0000000386 0.0004177542 -0.0006841736 0.0006536746 -0.6462325799 0.2718309832 0.5674509358 0.0260855984 0.3071702649 0.0101279350 -0.2374403826 -0.0685141469 -0.1172661993 -0.0012306366 0.0005282545 0.0000438774 -0.0001225152 0.0007463623 -0.0018580429 0.0013493710 0.0044308927 -0.0001430402 0.0001851896 0.0005937322 0.0001522235 -0.0009501665 -0.0000692073 0.0000315150 -0.0003081970 -0.0012926145 0.0026639392 -0.0018947873 0.0067865834 -0.0009621046 -0.0039866262 0.0006735893 -0.0067557525 0.0008009720 0.0005316647 0.0000807831 -0.0000002800 -0.0000016397 -0.0000007895 -0.0000027505 0.0000027544 0.0000094195 0.0000006604 0.0000012341 0.0000011591 -0.0000003390 -0.0000005106 -0.0000003110 -0.0000006272 0.0000017905 0.0000027214 0.0000021996 0.0000040122 0.0000043703 0.0000373835 -0.0000337721 -0.0001100869 -0.0000126587 -0.0000141811 -0.0000294269 0.0000029119 -0.0000014027 -0.0000025479 0.0000179359 -0.0000105412 -0.0000163705 -0.0000283411 -0.0000372473 -0.0000296863 0.0000168324 -0.0000012292 0.0000278418 0.0000087023 -0.0000166981 -0.0000243578 -0.0000452605 0.0000047911 -0.0000041114 -0.0000160715 0.0000058066 -0.0000047512 0.0000096065 -0.0000183967 -0.0000044696 -0.0001590574 -0.0000404283 -0.0003398367 -0.0001423801 0.0001522380 0.0001116045 -0.0000918402 0.0000313877 -0.0000811054 0.0002694680 0.0001012519 0.0001668736 -0.0000269842 0.0000637143 0.0000741237 -0.0000014842 0.0000010016 0.0000023908 -0.0000009081 0.0000009707 0.0000015473 0.0000836250 0.0000407492 0.0000577099 -0.0000218072 -0.0000720025 0.0000051674 -0.0000006682 0.0000001152 0.0000006658 0.0000002869 -0.0000013224 -0.0000004138 0.0000027703 0.0000088896 -0.0000003324 -0.0000011798 0.0000003052 0.0000008649 -0.0000247571 -0.0001067620 0.0000020991 0.0000014823 -0.0000017422 -0.0000012537 -0.0000008425 -0.0000044368 0.0000000727 -0.0000026378 -0.0000005334 0.0000015367 0.0000097882 0.0000549401 -0.0000052479 0.0000229984 0.0000107004 -0.0000145685 0.0000016091 0.0000001363 0.0000005955 -0.0000010503 -0.0000002611 0.0000000868 0.0000002557 0.0000077546 -0.0000008742 -0.0000023196 0.0000019206 -0.0000015947 -0.0000036145 -0.0000790801 0.0000117025 0.0000293993 -0.0000207916 0.0000172663 0.0000000986 0.0000039895 -0.0000002361 0.0000022306 0.0000002548 0.0000010633 -0.0000067552 -0.0000461230 -0.0000040760 -0.0000223076 -0.0000086838 -0.0000148536 0.0038001055 0.0001640133 -0.0021429278 -0.0262740450 -0.0191650244 0.0101496258 0.0012321809 -0.0011472231 0.0011436400 -0.0202457447 0.0185556736 0.0146206789 -0.0027936048 0.0033341228 -0.0047310283 0.0100185465 -0.0471677120 0.0448652963 0.0108675393 0.0125217579 0.0200164356 0.0143861569 -0.0159168894 -0.0091028250 0.0000007809 -0.0000050287 -0.0000025478 0.0003190831 0.0013474307 0.0000623056 -0.0000317303 -0.0001228284 -0.0000012173 0.0000123668 -0.0000065564 -0.0000055112 -0.0000571022 0.0000596499 0.0000373497 -0.0000418282 -0.0000222965 -0.0000166979 0.0000087312 -0.0000000168 0.0000056940 -0.0000014352 0.0000033877 -0.0000011513 0.0000055186 0.0000041251 0.0000022982 0.0000112029 -0.0000327090 0.0000017379 0.0000502615 0.0000137081 -0.0000165499 0.0001007801 -0.0000516829 0.0000286309 -0.0000910935 -0.0000425705 -0.0000021818 0.0000465710 0.0000028695 -0.0000079054 0.0000941560 0.0000031132 0.0001697314 -0.0475078483 -0.0234732436 -0.0189979519 0.0001171541 -0.0052623036 -0.0078442388 -0.0000928498 0.0003651433 0.0006850301 0.0000945174 0.0001856694 0.0000601236 0.0003633398 0.0004713162 0.0000097353 -0.0002302141 -0.0003114826 -0.0000103103 0.0004222482 0.0000366954 -0.0006954443 -0.0006012477 -0.0012150676 -0.0000787253 -0.0021696565 -0.0010179616 0.0021445678 0.0039262111 0.0049306361 0.0002478222 -0.0049985104 -0.0015775610 0.0068407328 0.0036371369 0.0014795603 0.0016623021 -0.0004103718 -0.0007592389 -0.0002184554 0.0042936318 0.0035566160 0.0020598647 -0.0000515026 -0.0000951555 0.0000480743 -0.0000010985 0.0000042368 0.0000327692 -0.0000244429 -0.0000141908 -0.0000054447 0.0015369494 0.0008375074 -0.0014432989 -0.0001630896 -0.0001069508 0.0000284300 -0.0000445279 -0.0000114090 0.0000423306 0.0002465624 0.0001781035 0.0000601387 -0.0181093407 -0.0079316181 0.0145816414 0.0020771708 0.0016483984 0.0007984503 0.0004973275 0.0002807502 -0.0004255616 -0.0000036777 -0.0000218873 -0.0002101265 -0.0013116591 -0.0015502134 -0.0050477718 0.0277867799 0.0254102795 0.0772911962 -0.0000015130 -0.0000026769 0.0000030778 0.0010421771 0.0003469873 -0.0007683814 -0.0004241007 -0.0007568002 0.0002986578 0.0002298324 0.0000997926 -0.0000572485 0.0000116553 0.0000754531 0.0000991353 -0.0005792038 0.0002512033 0.0002485194 -0.0011539073 0.0009431570 0.0011863714 0.0000391146 -0.0000578922 0.0000671762 0.0000236596 0.0001087057 0.0000231224 0.0000760732 0.0005002997 -0.0001957483 0.0042549879 -0.0014514797 -0.0043860566 0.0001332287 -0.0022226179 0.0000939445 0.0028578227 0.0005516856 0.0010222038 0.0139728409 -0.0125630511 -0.0113764587 -0.0001869231 0.0024191317 -0.0066058485 -0.0015841847 -0.0037510584 0.0002352934 0.0001085703 0.0001225806 -0.0000046804 -0.0006697133 0.0000261976 -0.0002458706 0.0000927173 0.0005100983 -0.0009397889 0.0007868030 -0.0032037500 0.0005253628 0.0010993818 -0.0001984340 0.0016765454 -0.0032151189 -0.0022561606 -0.0000390979 0.0000101759 0.0000092438 0.0000026532 -0.0000067776 -0.0000067977 -0.0000187242 0.0000158098 0.0000112511 0.0000121985 -0.0000043507 0.0000009381 0.0000023518 -0.0000126854 0.0000031827 0.0000175940 -0.0000085606 -0.0000142541 -0.0000168492 -0.0000341164 0.0000585652 0.0002745194 -0.0001225328 -0.0001256187 -0.0000244883 -0.0000098849 0.0000073363 0.0000044810 0.0000817688 -0.0000613395 -0.0002512428 0.0001257870 0.0001749962 0.0001282115 -0.0000175242 -0.0000017449 -0.0000292054 0.0000135727 -0.0000120345 -0.0000097404 -0.0000000569 0.0000107256 -0.0000016512 -0.0000181717 -0.0000015900 -0.0000693947 -0.0000051767 0.0000181969 0.0000111314 0.0001583296 0.0000187133 0.0003081717 -0.0000615787 0.0001383656 0.0001393548 0.0000263792 -0.0000025421 0.0000077440 0.0003876297 0.0000262717 0.0006661935 0.0000711537 -0.0001739875 -0.0001552668 0.0000032393 -0.0000024183 -0.0000055169 0.0000027608 -0.0000056946 -0.0000055464 -0.0000109193 -0.0000018831 -0.0000089050 -0.0000078289 0.0000043319 -0.0000003936 0.0000026657 -0.0000007205 -0.0000004131 -0.0000033783 0.0000062540 0.0000031217 -0.0000322107 -0.0001272874 0.0000044693 0.0000013276 0.0000071660 0.0000006442 0.0003346119 0.0014399478 0.0000076955 0.0000703242 -0.0001038141 -0.0000192264 -0.0000021716 -0.0000279149 -0.0000007653 -0.0000157174 -0.0000042432 0.0000100933 0.0000512748 0.0002589417 0.0000107240 0.0001717375 0.0000393765 -0.0000716145 -0.0000033690 -0.0000031200 -0.0000016328 0.0000018267 0.0000009402 0.0000012532 -0.0000010925 -0.0000056712 -0.0000001277 0.0000250279 -0.0000210618 0.0000168777 0.0000014075 0.0000612317 0.0000254937 -0.0002770085 0.0002239663 -0.0001628263 -0.0000015278 -0.0000077563 -0.0000005136 0.0000056405 0.0000036670 0.0000034318 0.0000110468 0.0000645789 0.0000036172 -0.0000478612 -0.0000355920 -0.0000149518 0.0053074672 -0.0004009471 -0.0028429269 -0.0314038946 -0.0220716321 0.0122526160 0.0009117712 0.0000830878 -0.0005771965 -0.0322033634 0.0312519256 0.0247930578 0.0110686367 -0.0600094187 -0.0687667150 0.0122976211 -0.0466736682 0.0299644684 0.2985098283 0.3079629157 0.5475431292 -0.4597341963 0.4669254167 0.2424383348 0.0007034791 -0.0004241446 -0.0003909661 -0.0315644079 -0.1516082489 -0.0054442407 0.0026520530 0.0133711837 0.0005091347 -0.0000533951 -0.0000734868 0.0000293568 -0.0000602975 -0.0000017408 0.0000247675 -0.0000113913 -0.0000005509 -0.0000075836 0.0000287661 0.0000028196 -0.0000133609 0.0000255215 0.0002176770 0.0000173512 -0.0000121952 -0.0000026939 -0.0000039830 -0.0002668403 -0.0025232825 -0.0001950817 0.0000076937 -0.0000021541 0.0000057788 0.0000510173 -0.0000302333 -0.0000126980 -0.0000198962 0.0000057034 -0.0000148876 0.0000078266 -0.0000050715 0.0000010167 0.0000194962 0.0000131617 0.0000124241 0.0033592250 0.0015373028 0.0013533863 0.0000043599 0.0000975617 0.0001514976 0.0000019595 -0.0000047392 -0.0000111490 0.0000092678 -0.0000003226 -0.0000024440 -0.0000236208 -0.0000109820 0.0000208861 0.0000267813 0.0000342113 0.0000008577 -0.0000354098 -0.0000103108 0.0000477907 0.0000033222 0.0000048499 -0.0000006693 0.0002380904 0.0000745420 -0.0002644268 -0.0003216874 -0.0004071977 -0.0000187954 0.0003875867 0.0001390816 -0.0005175099 -0.0002693351 -0.0001209469 -0.0000998416 0.0001552348 0.0001027544 0.0000555892 -0.0016516851 -0.0010747756 -0.0005954539 -0.0000006624 -0.0000012739 -0.0000065750 -0.0000008430 -0.0000022582 -0.0000068541 -0.0000177743 -0.0000150604 -0.0000076994 -0.0000055920 -0.0000030091 0.0000058897 0.0000062875 0.0000048102 0.0000024888 0.0000101490 0.0000054381 -0.0000074989 0.0001992406 0.0001725443 0.0001019932 0.0000751995 0.0000210129 -0.0000799005 -0.0000794671 -0.0000584171 -0.0000302311 -0.0001149825 -0.0000588763 0.0001006798 0.0000016605 0.0000196457 0.0000795437 0.0000198333 0.0000259297 0.0000714383 -0.0003393918 -0.0004123868 -0.0010796121 -0.0000023832 0.0000011903 -0.0000013439 0.0000058522 -0.0000086762 -0.0000019087 -0.0000070912 0.0000037046 0.0000100707 -0.0000009199 -0.0000035972 -0.0000033686 -0.0000004808 0.0000011690 0.0000000427 -0.0000017400 -0.0000055376 -0.0000004685 0.0000108100 -0.0000108872 -0.0000115471 -0.0000013641 -0.0000006856 -0.0000015115 0.0000037783 0.0000011022 -0.0000013895 0.0000180586 0.0000201934 0.0000099935 0.0000032499 -0.0000043221 -0.0000056229 0.0000046361 0.0000611593 0.0000012218 0.0000194829 0.0000057779 0.0000091061 -0.0001388564 0.0001035511 0.0000855593 -0.0000017403 -0.0000213808 0.0000582281 0.0000126978 0.0000490634 -0.0000026160 -0.0000001218 0.0000037426 0.0000003500 0.0000237364 0.0000016832 0.0000098663 -0.0000014888 -0.0000019635 0.0000059257 0.0000328524 -0.0001065204 0.0000146771 -0.0000658509 0.0000153028 -0.0001175285 -0.0001931501 -0.0001448722 -0.0000052803 0.0000029060 0.0000331601 0.0000261828 0.0002107009 -0.0001684953 -0.0004746272 0.0000035741 0.0000241587 0.0000482535 0.0000024854 -0.0000010999 -0.0000084306 0.0000097258 0.0000064312 0.0000019889 -0.0000166550 0.0000025973 0.0000285748 -0.0023171115 0.0016975846 0.0053156810 -0.0003649027 -0.0004295449 -0.0004481447 -0.0000042132 -0.0000007928 0.0000014244 -0.0000219264 0.0000129844 0.0000205948 -0.0001289645 -0.0001637170 -0.0001412458 0.0000018167 -0.0000012693 0.0000012244 -0.0000007393 0.0000002873 -0.0000005243 0.0000018603 -0.0000011481 0.0000002551 -0.0000017636 0.0000008344 -0.0000006257 0.0000028521 -0.0000031882 -0.0000009928 -0.0000069529 0.0000036041 -0.0000092592 0.0000007996 0.0000002619 -0.0000003592 -0.0000029894 0.0000017099 -0.0000011070 0.0000072159 0.0000008377 0.0000091643 -0.0000134786 0.0000256822 0.0000138240 0.0000016967 0.0000004678 -0.0000015227 0.0000017715 0.0000006227 -0.0000000488 0.0000009115 -0.0000005924 0.0000011140 0.0000009872 -0.0000008850 -0.0000001137 -0.0023376025 0.0010289569 0.0013911556 0.0002733411 0.0002552412 -0.0001386074 -0.0156183761 -0.0695931159 0.0009585738 -0.0235183003 0.0276132430 0.0162899786 0.1866089854 0.8026142736 -0.0144150169 0.2983799400 -0.3161213741 -0.2032283242 -0.0015317291 -0.0050148366 0.0005063569 0.0162945409 0.0054269601 -0.0092816305 0.0147388910 0.0657400309 -0.0029154162 -0.1927162542 -0.0735483956 0.1089270327 0.0000164812 -0.0000142912 -0.0000230215 0.0000399225 0.0000092735 0.0000189471 -0.0000193776 -0.0001797124 -0.0000127589 -0.0002916887 0.0002463476 -0.0001928676 0.0002574257 0.0020751494 -0.0000147581 0.0034775076 -0.0029188163 0.0022665094 -0.0001037156 -0.0009437443 -0.0000133449 0.0004601903 0.0002528016 0.0002461338 0.0010208984 0.0109259510 0.0000711774 -0.0056541252 -0.0029347980 -0.0030212655 -0.0000021642 -0.0000029468 -0.0000023491 0.0000313257 0.0000173561 -0.0000134437 0.0000060312 -0.0000118501 0.0000144531 -0.0000215879 0.0000197783 0.0000156309 -0.0000186397 0.0000489923 0.0000381495 0.0000044891 -0.0000389042 0.0000489828 -0.0001630584 -0.0001585539 -0.0002845682 0.0003912397 -0.0004108515 -0.0002153347 -0.0000138173 0.0000078331 0.0000081195 0.0006541654 0.0030767681 0.0000999957 -0.0000560524 -0.0002744310 -0.0000095020 -0.0000257622 0.0000153945 -0.0000124728 0.0000137388 -0.0000041198 -0.0000051173 0.0000339502 -0.0002365955 0.0000126252 0.0000139352 -0.0001067688 0.0000135113 0.0038490730 0.0348849636 0.0026675270 -0.0017810338 -0.0004504695 -0.0008620612 -0.0391033121 -0.3972675363 -0.0288898094 -0.0000118879 0.0000243181 -0.0000103459 -0.0000059277 0.0000000726 0.0000009376 0.0000048209 0.0000031333 0.0000035039 -0.0000028984 -0.0000001129 0.0000023208 -0.0000027938 -0.0000033795 -0.0000028686 -0.0005623479 -0.0002563947 -0.0002288559 -0.0000001149 -0.0000023119 -0.0000072523 -0.0000001823 0.0000000713 0.0000001220 -0.0000019382 -0.0000007027 0.0000002043 0.0000021629 0.0000010560 -0.0000022476 -0.0000049441 -0.0000058157 0.0000001985 0.0000107416 0.0000035790 -0.0000141242 0.0000006261 0.0000006667 0.0000000397 -0.0000228933 -0.0000061724 0.0000265456 0.0000567802 0.0000724217 0.0000017949 -0.0001190909 -0.0000426121 0.0001556946 0.0000452233 0.0000204757 0.0000168986 -0.0000295754 -0.0000189835 -0.0000109735 0.0003176460 0.0002047444 0.0001122988 -0.0000000312 0.0000000949 0.0000012902 0.0000003331 0.0000014166 0.0000052576 0.0000025090 0.0000022034 0.0000010124 0.0000045186 0.0000021514 -0.0000040296 -0.0000008592 -0.0000008645 -0.0000000832 -0.0000039185 -0.0000020578 0.0000029949 -0.0000288817 -0.0000245320 -0.0000159234 -0.0000502569 -0.0000221267 0.0000472363 0.0000112835 0.0000110056 0.0000015779 0.0000413180 0.0000212401 -0.0000375376 -0.0000020764 -0.0000158083 -0.0000604422 -0.0000027896 -0.0000035007 -0.0000077329 0.0000401994 0.0000490261 0.0001134956 0.0000131704 0.0001095430 0.0000583091 -0.0000010522 0.0000014817 0.0000003201 0.0000022476 0.0000002484 -0.0000017431 -0.0000004226 -0.0000000606 0.0000004363 0.0000011099 0.0000001104 -0.0000002497 0.0000050547 -0.0000037379 -0.0000028339 -0.0000019928 0.0000033904 -0.0000021165 -0.0000011814 0.0000010110 -0.0000012079 -0.0000013678 -0.0000003688 0.0000004796 -0.0000088916 -0.0000095698 -0.0000043187 -0.0000477903 0.0000247473 0.0000485947 0.0000090696 0.0000310921 0.0000011106 -0.0000230414 -0.0000068780 -0.0000099502 0.0000157227 -0.0000026542 -0.0000108662 -0.0000034551 -0.0000159620 0.0000449081 0.0000020093 -0.0000244158 -0.0000077343 0.0000011452 -0.0000017818 -0.0000007838 0.0000064336 0.0000008683 0.0000040776 -0.0000003732 -0.0000104095 0.0000173107 -0.0000144267 0.0000479171 -0.0000068298 0.0000288053 -0.0000067142 0.0000513346 0.0000962469 0.0000718238 0.0000018984 0.0000010990 -0.0000014711 -0.0000015600 -0.0000054640 0.0000037239 0.0000113410 -0.0000021572 -0.0000028804 -0.0000037471 -0.0000008347 -0.0000000854 0.0000004641 0.0000009330 -0.0000005168 -0.0000012882 -0.0000020591 -0.0000024828 -0.0000023403 0.0000566047 -0.0000385084 -0.0001258953 0.0000306498 0.0000383142 0.0000350017 0.0000008314 0.0000001347 -0.0000011937 -0.0000084078 0.0000047197 0.0000126531 0.0000221712 0.0000293407 0.0000214119 -0.0004059473 -0.0001230414 -0.0007849476 -0.0000040679 0.0000430896 0.0000954345 0.0000010232 -0.0000056084 -0.0000210234 -0.0000158208 0.0000251520 0.0000286859 0.0000549403 -0.0000156482 0.0000806173 0.0047863004 0.0008708160 0.0088304113 0.0005273290 -0.0009799953 -0.0010152958 0.0000054294 -0.0000001600 -0.0000002588 -0.0000403332 -0.0000147851 -0.0001741047 0.0002081406 -0.0004314601 -0.0005059747 -0.0000003860 -0.0000001206 0.0000006087 -0.0000002507 -0.0000001764 0.0000002004 -0.0000028525 0.0000005873 -0.0000013482 -0.0000027971 0.0000009006 -0.0000008810 0.0000342869 -0.0000076411 -0.0000213098 -0.0000242051 -0.0000103818 -0.0000142929 0.0002300381 0.0009961638 -0.0000160970 0.0003179768 -0.0003915199 -0.0002209193 -0.0026747912 -0.0115138942 0.0002068003 -0.0040938091 0.0043417488 0.0027864589 0.0000028644 -0.0000461173 -0.0000257358 -0.0001239135 -0.0000213075 0.0000709634 0.0000237608 0.0002754642 -0.0000185174 0.0014370156 0.0005346317 -0.0008260601 -0.0002086509 0.0001619996 -0.0001258891 0.0029937619 -0.0001920396 0.0015983356 0.0000045945 -0.0043800055 0.0003815695 -0.0135786202 0.0102481617 -0.0087919946 0.0057303962 0.0571331998 -0.0010871308 0.1568717735 -0.1308239314 0.1025532237 -0.0065946669 -0.0641586024 -0.0007321880 0.0305802445 0.0177273913 0.0162244009 0.0692417952 0.7432415265 0.0045860294 -0.3756650496 -0.1950383404 -0.2006758702 0.0000025352 -0.0000006817 -0.0000002468 -0.0000142338 -0.0000092368 0.0000053555 -0.0000033398 0.0000102388 -0.0000087628 -0.0000114049 0.0000115361 0.0000078048 -0.0000018886 0.0000043101 0.0000019495 0.0000038666 -0.0000093197 0.0000146449 -0.0000099333 -0.0000072644 -0.0000227085 0.0000313662 -0.0000336080 -0.0000130325 -0.0000159599 0.0000150878 0.0000149695 0.0011159698 0.0050211948 0.0001455437 -0.0000912446 -0.0004467725 -0.0000163422 -0.0000150301 -0.0000070155 -0.0000106882 -0.0000038908 0.0000104770 -0.0000112220 0.0000852914 0.0008006573 0.0000457242 0.0000368266 0.0000780113 0.0000557650 -0.0083886331 -0.0792728958 -0.0059019095 0.0035874679 0.0009950559 0.0017291821 0.0835282484 0.9039989584 0.0630717479 -0.0001872064 -0.0001501012 -0.0000238918 -0.0000073179 -0.0000132480 0.0000117486 0.0000696770 0.0000361738 -0.0000248214 -0.0000289384 0.0000075097 0.0000128985 -0.0000506398 -0.0000420224 -0.0000142911 -0.0060089178 -0.0027703843 -0.0024117471 -0.0000004970 -0.0000991520 -0.0001429533 0.0000003955 0.0000076919 0.0000095129 -0.0000180103 -0.0000078324 -0.0000019704 0.0000078843 0.0000022219 -0.0000099032 -0.0000399691 -0.0000486842 0.0000009383 0.0000570734 0.0000162344 -0.0000769303 0.0000045108 0.0000039751 -0.0000002694 -0.0000974193 -0.0000334309 0.0001202734 0.0004614504 0.0005732797 0.0000299961 -0.0006261898 -0.0002342772 0.0008323021 0.0004745806 0.0002228815 0.0001849048 -0.0003283905 -0.0002284369 -0.0001228834 0.0036628529 0.0023602592 0.0012848836 -0.0000010699 0.0000035607 0.0000164812 0.0000006532 0.0000007105 -0.0000011653 0.0000816449 0.0000692457 0.0000360842 0.0000122023 0.0000060699 -0.0000134044 0.0000111684 0.0000097555 0.0000062809 -0.0000420264 -0.0000225070 0.0000320869 -0.0009149368 -0.0007911727 -0.0004549637 -0.0001526205 -0.0000509781 0.0001673950 -0.0001232304 -0.0001088437 -0.0000703127 0.0004865788 0.0002493665 -0.0004221414 -0.0000000978 0.0000050692 0.0000324522 0.0000030843 0.0000050340 0.0000162928 -0.0000219623 -0.0000625751 -0.0002824695 -0.0000020947 -0.0003335396 -0.0001322343 -0.0000203212 0.0000249742 0.0000087724 0.0000181641 -0.0000171609 -0.0000371363 0.0000064645 0.0000203411 0.0000147402 -0.0000035529 -0.0000085587 -0.0000010897 -0.0000101380 -0.0000031365 -0.0000012878 -0.0000279917 0.0000294585 0.0000377411 -0.0000055936 -0.0000042057 -0.0000019567 -0.0000102257 -0.0000020451 0.0000048237 0.0000154202 -0.0000084038 -0.0000004411 0.0000317237 -0.0000400014 -0.0000375188 -0.0000071606 0.0000896542 -0.0000022026 0.0001098593 0.0000192361 0.0000523027 0.0004118676 -0.0003443907 -0.0002496017 0.0000034750 0.0000557647 -0.0002091876 -0.0000480716 -0.0000593230 0.0000164536 0.0000094427 0.0000789932 0.0000220416 0.0000700722 -0.0000040793 0.0000260438 0.0000003903 0.0000010713 -0.0000176872 -0.0000469183 0.0001435394 -0.0000156319 -0.0000188305 0.0000002677 -0.0000134382 -0.0000877628 -0.0000638907 0.0000036218 0.0000039119 -0.0000011493 -0.0000024835 -0.0000113696 0.0000067915 0.0000212807 -0.0000021948 -0.0000046104 -0.0000054237 -0.0000032330 -0.0000008927 0.0000010506 0.0000014326 0.0000003516 -0.0000001093 -0.0000065537 -0.0000056233 -0.0000047109 0.0001104095 -0.0000724535 -0.0002374018 0.0000418985 0.0000576597 0.0000526515 0.0000046477 0.0000006464 -0.0000050053 0.0000008034 -0.0000029368 -0.0000050041 0.0000691928 0.0000740378 0.0000580228 0.0009925343 0.0003148358 0.0019311699 0.0000132705 -0.0000992204 -0.0002097067 -0.0000160823 0.0000196305 0.0000434078 0.0000413757 -0.0000608794 -0.0000779615 -0.0001508977 0.0000565071 -0.0001841695 -0.0118738267 -0.0022115949 -0.0218807546 -0.0012828967 0.0022855019 0.0023684261 -0.0000033169 -0.0000073642 0.0000001965 0.0001344540 0.0000463760 0.0005255400 -0.0003859367 0.0008040072 0.0011256539 -0.0000020532 -0.0000000593 0.0000031382 -0.0000011280 -0.0000007265 0.0000008295 0.0000049071 0.0000005923 0.0000024972 0.0000040045 0.0000024873 0.0000057845 0.0000177882 0.0000056103 -0.0000120177 -0.0000031963 -0.0000042543 -0.0000043948 0.0000529194 0.0002172314 -0.0000048728 0.0000746824 -0.0001016781 -0.0000523677 -0.0005997637 -0.0025363560 0.0000506192 -0.0009817504 0.0010370852 0.0006719536 -0.0000272995 -0.0001431376 -0.0000154643 0.0000795637 0.0000484053 -0.0000465741 0.0003226396 0.0015867093 0.0000280227 -0.0010027837 -0.0003980298 0.0005740393 0.0001345124 0.0005880968 -0.0000005048 -0.0016738308 0.0013663380 -0.0008111151 -0.0001772944 -0.0026849465 0.0001346440 -0.0075004677 0.0058896096 -0.0048776470 0.0037226564 0.0333020489 -0.0004348200 0.0874177481 -0.0727383610 0.0570839527 -0.0029393928 -0.0258902910 -0.0004545421 0.0157039664 0.0085820368 0.0083802585 0.0309051871 0.3013225350 0.0032518735 -0.1869739032 -0.0972691208 -0.0998514535 -0.0000077603 -0.0000034423 0.0000132060 0.0000799865 0.0000580586 -0.0000302366 -0.0000336068 0.0000622491 -0.0000583031 0.0000767711 -0.0000832555 -0.0000561733 -0.0000145640 0.0000192437 0.0000249872 -0.0000223405 0.0000878361 -0.0000849451 -0.0000450370 -0.0000662491 -0.0000983040 0.0002681137 -0.0002751344 -0.0001154421 0.0033243406 -0.0022549227 -0.0018590371 -0.2139772177 -0.9573518023 -0.0271758810 0.0176256421 0.0842903385 0.0027964961 -0.0000043649 -0.0001163477 -0.0000496957 -0.0001842712 -0.0008065997 0.0000017907 -0.0000077408 -0.0000015494 0.0000132578 -0.0000029611 0.0000154105 0.0000076580 -0.0000329994 -0.0003337429 -0.0000233858 0.0000148240 0.0000003420 0.0000020829 0.0003528171 0.0038378653 0.0002659597 -0.0000106332 0.0000025162 -0.0000178031 -0.0001185516 0.0001923623 0.0000051320 0.0000611810 -0.0000121405 0.0000587343 -0.0000250643 0.0000110195 -0.0000085222 -0.0000595683 -0.0000398597 -0.0000352937 -0.0092158596 -0.0042317631 -0.0037470483 -0.0000117083 -0.0010707638 -0.0015785194 -0.0000040126 0.0000841499 0.0001317439 -0.0000263720 -0.0000062380 0.0000031861 0.0000806957 0.0000268315 -0.0000870094 -0.0000988524 -0.0001298317 -0.0000079945 0.0001047073 0.0000302464 -0.0001336521 0.0000028273 0.0000030531 0.0000016830 -0.0009063529 -0.0002890596 0.0010367205 0.0012003956 0.0015150399 0.0000816952 -0.0011520377 -0.0004159088 0.0014939161 0.0007499727 0.0003295789 0.0002774379 -0.0005340469 -0.0003293177 -0.0001857219 0.0056512323 0.0036218108 0.0020029565 -0.0000016643 0.0000007348 0.0000243009 0.0000024313 -0.0000190599 -0.0000844131 0.0001519603 0.0001281166 0.0000679505 0.0000268159 0.0000133322 -0.0000268125 0.0000127644 0.0000114882 0.0000119015 -0.0001073608 -0.0000563240 0.0000879823 -0.0017333589 -0.0014810314 -0.0008502312 -0.0003096507 -0.0001180870 0.0003116125 -0.0001564998 -0.0001332442 -0.0000914772 0.0012508100 0.0006512044 -0.0010965532 0.0000142735 0.0002558666 0.0010014885 -0.0000208181 -0.0000304300 -0.0000714118 0.0003658270 0.0004431810 0.0010621250 0.0000029756 -0.0000039661 0.0000009201 -0.0000133608 0.0000199670 0.0000045489 0.0000170807 -0.0000087191 -0.0000254128 0.0000018960 0.0000074051 0.0000090972 0.0000009827 -0.0000012821 -0.0000005619 0.0000015141 0.0000069958 0.0000013516 -0.0000222866 0.0000228846 0.0000209461 0.0000028614 0.0000028797 0.0000016193 -0.0000068975 -0.0000023162 0.0000035023 -0.0002158928 -0.0001685102 -0.0000957348 0.0000036016 0.0000025181 0.0000025431 -0.0000032225 -0.0000735798 -0.0000019801 -0.0000281483 -0.0000091584 -0.0000128196 0.0002885135 -0.0002096098 -0.0001761894 0.0000031531 0.0000321456 -0.0000798570 -0.0000274541 -0.0001009797 0.0000022848 -0.0000037751 -0.0000237500 -0.0000047537 -0.0000436872 -0.0000019454 -0.0000183931 0.0000012877 -0.0000047516 0.0000091713 -0.0001891716 0.0005796327 -0.0000942850 0.0006680503 -0.0001496848 0.0011710647 0.0020858480 0.0015614612 0.0000483190 0.0001652508 0.0004101708 0.0001489416 0.0015185137 -0.0012800489 -0.0035104858 0.0000565560 0.0001825281 0.0003317999 -0.0000201676 -0.0000182084 -0.0000464761 0.0000666590 0.0000589270 0.0000685058 -0.0001799291 -0.0000066764 0.0002064957 -0.0175038340 0.0129296328 0.0398469316 -0.0029530435 -0.0032399763 -0.0034100155 -0.0000087350 0.0000069212 -0.0000043298 0.0000522408 -0.0001035116 -0.0004444111 -0.0005692754 -0.0007761456 -0.0010437751 -0.0000011700 0.0000023494 0.0000011238 0.0000013595 -0.0000003062 0.0000009815 -0.0000034311 0.0000021501 -0.0000003761 0.0000011058 -0.0000018269 -0.0000021268 -0.0000045422 0.0000046399 0.0000012006 -0.0000076686 -0.0000091787 -0.0000187026 -0.0000003877 -0.0000001658 -0.0000008241 0.0000057554 -0.0000032945 0.0000010464 0.0000089823 0.0000038320 0.0000213545 0.0000254291 -0.0000378031 -0.0000236112 0.0000070454 -0.0000014637 -0.0000022986 0.0000074223 -0.0000032821 -0.0000046608 -0.0000018325 0.0000008799 -0.0000015404 -0.0000021574 0.0000016149 0.0000006893 -0.0026308430 -0.0005226189 0.0012497667 -0.0000071834 -0.0005560669 -0.0000139957 0.0016744702 0.0086800976 0.0000412974 0.0056732548 -0.0059244898 -0.0038670262 -0.0208990413 -0.1013806296 0.0004337464 -0.0650708260 0.0690714197 0.0443257467 0.0003928539 0.0017919099 -0.0000960621 -0.0048595779 -0.0018028247 0.0027530777 -0.0044568518 -0.0213800867 0.0007707512 0.0572680999 0.0217478358 -0.0323455462 0.0000026499 0.0000079363 0.0000032655 -0.0000087769 0.0000017943 -0.0000010508 0.0000128968 0.0001008921 0.0000113799 0.0000226974 -0.0000359085 0.0000190207 -0.0001449992 -0.0011546728 -0.0000750678 -0.0003599295 0.0003175444 -0.0002483743 -0.0000213646 -0.0002054894 -0.0000027067 0.0001462277 0.0000867760 0.0000770687 0.0002402932 0.0024158783 0.0000228269 -0.0017210392 -0.0008910218 -0.0009232372 0.0000007375 0.0000120034 0.0000051071 -0.0000705020 -0.0000349025 0.0000269672 0.0000033648 -0.0000078802 0.0000036891 0.0000860638 -0.0000771644 -0.0000632413 0.0000117765 -0.0000461919 -0.0000454188 0.0000076909 0.0000071904 -0.0000112198 0.0002004043 0.0001994798 0.0003489683 -0.0003543632 0.0003693016 0.0002015235 -0.0000096055 0.0000078066 0.0000056272 0.0006310010 0.0028286567 0.0000775884 -0.0000511256 -0.0002499461 -0.0000096364 -0.0000009234 0.0000008654 0.0000008379 0.0000117877 -0.0000072524 -0.0000027409 0.0000094619 0.0000009342 0.0000081095 -0.0000025300 -0.0000001866 -0.0000011699 0.0000138685 0.0001231519 0.0000089450 -0.0000096967 -0.0000019275 -0.0000039475 -0.0001376004 -0.0014263585 -0.0001024538 -0.0000206813 -0.0000248365 -0.0000139082 -0.0000164478 -0.0000072281 -0.0000204678 0.0000069024 0.0000929293 0.0000824972 0.0000367401 -0.0000516956 -0.0000488983 -0.0000659052 -0.0001030977 -0.0000806862 -0.0108290073 -0.0050834820 -0.0039863808 -0.0000347063 -0.0023000615 -0.0033397739 0.0000246405 0.0002108779 0.0002649103 -0.0000746223 -0.0000926274 -0.0000484060 0.0000667163 -0.0000245564 -0.0001411444 -0.0004271749 -0.0005057598 0.0000211057 0.0008124170 0.0002980544 -0.0010193596 0.0000564126 0.0000853367 0.0000176179 -0.0011957166 -0.0003624097 0.0014448943 0.0048691231 0.0060936843 0.0003456431 -0.0089349469 -0.0034882720 0.0116583585 0.0009481458 0.0003175675 0.0002095784 -0.0044612041 -0.0026298989 -0.0014404702 0.0506081292 0.0302865530 0.0154195185 -0.0011577442 -0.0002400783 0.0018522428 -0.0002890273 -0.0109824271 -0.0449162579 0.0366611850 0.0308309014 0.0160141016 -0.0020612379 -0.0013184220 0.0008135583 0.0134142825 0.0111898090 0.0076364206 -0.0305421759 -0.0156614200 0.0263772213 -0.4176077590 -0.3589290597 -0.2002664166 0.0235575059 0.0125640842 -0.0188965666 -0.1685911465 -0.1360298853 -0.0780538273 0.3631174942 0.1872685990 -0.3180654730 0.0089654962 0.1317762537 0.5254134069 0.0002553379 0.0003062961 0.0008767505 -0.0040097535 -0.0048537299 -0.0136073820 -0.0000015405 0.0000018566 -0.0000003664 -0.0000415179 0.0000329371 -0.0000381099 0.0000482060 0.0001925388 0.0001265095 0.0000070586 -0.0000177820 -0.0000636172 -0.0000012391 -0.0000224712 0.0000051887 -0.0000085496 0.0000080351 -0.0000024211 0.0000303624 0.0000534313 -0.0001755110 -0.0000228636 -0.0000429174 0.0000294830 -0.0000870080 -0.0001787242 0.0000004763 0.0122166131 0.0101091455 0.0046205088 0.0000455705 -0.0000212411 -0.0000349702 -0.0000013111 0.0000046027 -0.0000153845 0.0000424382 0.0000038091 0.0000235261 -0.0004207328 0.0001282466 0.0003261924 -0.0000062683 -0.0009279781 0.0017384489 -0.0000182336 0.0000836983 -0.0000565039 0.0001006359 0.0004703319 0.0000968791 0.0002310357 -0.0000055749 0.0001496501 -0.0000415569 0.0002407472 -0.0005735910 0.0115176870 -0.0361517039 0.0063614625 -0.0337391797 0.0082125440 -0.0584407978 -0.1221103525 -0.0910044000 -0.0028510024 -0.0000042912 -0.0000027251 0.0000061552 -0.0000153784 0.0000085642 0.0000275865 -0.0000091575 -0.0000107411 -0.0000132618 0.0000091886 -0.0000048814 0.0000093234 0.0001048635 -0.0000740558 -0.0002051977 -0.0000319498 -0.0000256710 -0.0000150644 0.0001379775 -0.0001247395 -0.0003679968 0.0001309476 0.0001100740 0.0000958538 0.0001130720 0.0000356215 0.0001566715 -0.0011127171 0.0008402432 0.0022442355 0.0001722217 0.0002741577 0.0002290850 0.0000090901 0.0000006832 0.0000164442 0.0000024536 -0.0000059108 -0.0000081382 0.0000031381 -0.0000016580 0.0000007396 0.0000001923 0.0000023535 0.0000045091 0.0000071476 -0.0000098974 -0.0000087417 -0.0000957487 -0.0000165953 -0.0001966300 -0.0000507174 0.0000641516 0.0000734065 -0.0000072388 0.0000033357 0.0000040654 -0.0000232860 -0.0000059185 -0.0000362108 -0.0000603954 0.0001135477 0.0001071708 0.0000201748 -0.0000193371 -0.0000494622 -0.0000939375 0.0000329815 -0.0000747644 0.0000018623 -0.0000003463 -0.0000004895 0.0000044013 -0.0000006987 -0.0000034317 0.0000070636 0.0000019800 -0.0000028036 0.0000010603 0.0000009837 -0.0000006409 -0.0000063081 -0.0000377856 -0.0000006747 -0.0000361504 0.0000372799 0.0000246533 0.0000919161 0.0004365437 -0.0000056206 0.0004064958 -0.0004320031 -0.0002789512 -0.0000038580 -0.0000166075 0.0000010211 0.0000190887 0.0000069041 -0.0000108162 0.0000431731 0.0001976653 -0.0000104206 -0.0002361639 -0.0000892291 0.0001323878 0.0000008185 -0.0000004890 0.0000003058 0.0000027201 -0.0000023583 0.0000016293 -0.0000008843 0.0000044742 -0.0000008970 0.0000243837 -0.0000186627 0.0000159459 -0.0000028643 -0.0000637921 0.0000046665 -0.0002746785 0.0002273177 -0.0001802084 0.0000040578 0.0000284574 0.0000011638 -0.0000367816 -0.0000185527 -0.0000195610 -0.0000363710 -0.0003428675 -0.0000046475 0.0004257560 0.0002166053 0.0002268931 0.0000920819 0.0000327921 -0.0000369650 -0.0006933022 -0.0003881835 0.0001799080 -0.0000138595 -0.0000245974 0.0000857193 -0.0002208884 0.0001808338 0.0001868414 -0.0000801477 0.0000136975 -0.0001042017 0.0000726273 -0.0005218573 0.0004974169 0.0005981884 0.0006298622 0.0012168252 0.0003103182 -0.0003946241 -0.0003262556 -0.0000128114 0.0000091342 0.0000074170 0.0007761664 0.0034837677 0.0001010416 -0.0000631627 -0.0003060240 -0.0000105692 -0.0000021534 0.0000007981 0.0000013849 0.0000103617 -0.0000065927 -0.0000049640 0.0000090613 0.0000025248 0.0000049308 -0.0000021843 -0.0000003758 -0.0000008139 0.0000020059 0.0000152541 0.0000020644 -0.0000022238 -0.0000021199 -0.0000011457 -0.0000120689 -0.0001668219 -0.0000120085 -0.0000150410 -0.0000082485 -0.0000040341 -0.0000145010 0.0000067408 -0.0000087108 0.0000156436 0.0000222181 0.0000244127 0.0000004738 -0.0000078198 -0.0000131221 -0.0000244726 -0.0000273245 -0.0000277457 -0.0027489077 -0.0013771771 -0.0009511282 -0.0000047613 0.0008928707 0.0013057109 0.0000066265 -0.0000701456 -0.0001136524 -0.0000179247 -0.0000333408 -0.0000324201 -0.0000417774 -0.0000279839 0.0000312404 0.0000280313 0.0000458757 0.0000207917 0.0001214661 0.0000399229 -0.0001512576 0.0000166209 0.0000265956 0.0000044022 0.0003952714 0.0001462255 -0.0004529906 -0.0003944736 -0.0005006220 -0.0000314789 -0.0013040424 -0.0005245816 0.0016805464 0.0002153555 0.0001170612 0.0000688164 -0.0012763648 -0.0008602987 -0.0003708419 0.0148963922 0.0091311683 0.0046817646 -0.0001935625 -0.0000004384 0.0003146166 -0.0000833964 -0.0019562685 -0.0078144314 0.0067408762 0.0058337087 0.0030249200 -0.0003905919 -0.0002596343 0.0001935836 0.0025220166 0.0020913510 0.0013879638 -0.0050601873 -0.0025670447 0.0043574411 -0.0783118878 -0.0673283604 -0.0375190911 0.0047705043 0.0025107015 -0.0038180854 -0.0313763045 -0.0253435425 -0.0145232930 0.0603530585 0.0312003235 -0.0529321847 0.0015772499 0.0229685310 0.0915053114 0.0001031659 0.0001282146 0.0003542665 -0.0015870131 -0.0019923685 -0.0054796439 0.0000018025 -0.0000010048 0.0000006165 -0.0001087894 0.0002157516 0.0001471600 0.0006121730 -0.0005987188 -0.0010677166 -0.0001390678 0.0001241553 0.0003642292 0.0000702172 0.0000817889 -0.0000159863 0.0000493920 -0.0000503921 -0.0000082746 -0.0000762786 0.0000393731 0.0000354731 0.0001292200 0.0002113596 -0.0000930819 0.0003584576 0.0003744023 0.0001588966 -0.0713996762 -0.0550748219 -0.0284898094 -0.0005242937 0.0001945758 0.0004893447 0.0000155244 0.0001633859 0.0000713907 -0.0003228824 -0.0000263213 -0.0002765746 0.0006533956 -0.0005625875 -0.0004196000 0.0000531240 -0.0000847483 0.0000128635 -0.0001168214 -0.0000882381 -0.0000741424 -0.0005501896 -0.0024832751 -0.0005287927 -0.0016736603 0.0000881662 -0.0008064981 0.0001371903 -0.0009528982 0.0023683368 -0.0592254992 0.1820952972 -0.0325258141 0.2069160624 -0.0485255277 0.3587775829 0.6931580651 0.5174882299 0.0154788311 -0.0000018742 -0.0000023226 0.0000024698 -0.0000002568 0.0000018786 0.0000005802 0.0000006258 0.0000018106 0.0000024107 0.0000058730 0.0000010846 0.0000006463 0.0000126352 -0.0000111475 -0.0000289588 -0.0000017018 -0.0000022212 -0.0000027095 0.0000091907 -0.0000151929 -0.0000247559 -0.0000134309 -0.0000263724 -0.0000246976 0.0000058598 0.0000025059 0.0000278683 -0.0001602267 0.0001179077 0.0003128339 0.0000105297 0.0000244425 0.0000271978 -0.0000078473 -0.0000001561 -0.0000112572 -0.0000023268 0.0000059289 0.0000094554 -0.0000031713 0.0000023310 -0.0000006433 -0.0000049831 -0.0000024491 -0.0000111944 -0.0000012760 0.0000008711 0.0000006488 0.0000772122 0.0000161055 0.0001418643 0.0000604475 -0.0000656263 -0.0000823636 0.0000116632 -0.0000044899 -0.0000087679 0.0000674574 0.0000137890 0.0000995821 0.0000088814 -0.0000095133 -0.0000169322 0.0000076088 -0.0000026468 -0.0000097820 -0.0000096446 0.0000073314 -0.0000111437 -0.0000028178 -0.0000005071 0.0000027096 -0.0000076224 0.0000011442 0.0000062456 0.0000089351 0.0000027648 -0.0000040135 0.0000012581 0.0000011821 -0.0000006112 -0.0000082594 -0.0000472058 -0.0000006860 -0.0000450146 0.0000473867 0.0000307430 0.0001177406 0.0005534408 -0.0000040325 0.0005137011 -0.0005433327 -0.0003493843 -0.0000008322 -0.0000011454 0.0000004899 0.0000203223 0.0000057696 -0.0000116201 0.0000083597 0.0000221132 -0.0000003507 -0.0002420875 -0.0000906894 0.0001369476 0.0000004579 0.0000007727 0.0000004474 0.0000001805 -0.0000004308 -0.0000003102 0.0000006331 0.0000049597 -0.0000000166 -0.0000045679 0.0000041189 -0.0000028869 -0.0000054474 -0.0000620016 -0.0000001052 0.0000426733 -0.0000376377 0.0000284034 0.0000021070 0.0000093694 0.0000008648 -0.0000230534 -0.0000117965 -0.0000122637 -0.0000092758 -0.0001103283 -0.0000014363 0.0002559244 0.0001329990 0.0001369074 0.0002048829 0.0001488951 -0.0001509176 -0.0024281142 -0.0016626665 0.0009003092 0.0003762271 -0.0006806164 0.0007482307 -0.0005732962 0.0005677692 0.0004757394 -0.0000465178 -0.0001516703 -0.0003197625 0.0001575004 -0.0007709522 0.0006790331 0.0015105504 0.0015025610 0.0027097111 -0.0009390343 0.0010513639 0.0004682020 -0.0000118531 0.0000106321 0.0000088941 0.0006581942 0.0030041190 0.0000817458 -0.0000521648 -0.0002615282 -0.0000093452 -0.0000071352 0.0000036127 0.0000045895 0.0000348602 -0.0000337049 -0.0000207590 0.0000221170 0.0000094065 0.0000105589 -0.0000045259 -0.0000005469 -0.0000030762 0.0000086982 0.0000724418 0.0000062006 -0.0000065566 -0.0000032392 -0.0000033140 -0.0000811036 -0.0008388704 -0.0000618026 -0.0000349939 -0.0000156926 0.0000051599 -0.0000594516 0.0000230557 -0.0000232634 0.0000731796 0.0000576323 0.0000292676 -0.0000102175 -0.0000418557 -0.0000224023 -0.0000314048 -0.0000382803 -0.0000771255 0.0250496617 0.0116501907 0.0104795940 -0.0013889026 -0.3965516530 -0.5784780335 0.0005602852 0.0343150546 0.0492864560 -0.0005684936 -0.0010044922 -0.0004860989 0.0138803062 0.0033178234 -0.0184056190 -0.0274818184 -0.0353096368 -0.0029849590 0.0183515648 0.0077608322 -0.0227215080 0.0003547409 0.0008561347 0.0006900344 -0.1785983552 -0.0599835470 0.2120280719 0.3309246426 0.4184217050 0.0266028844 -0.2124105171 -0.0801415461 0.2778465832 -0.0017094467 -0.0009399668 -0.0009160432 -0.0036597690 -0.0019751776 -0.0010637073 0.0402004340 0.0237649430 0.0134929791 -0.0000130192 -0.0000080554 0.0000935807 0.0000270497 0.0003751068 0.0014855794 0.0001194894 0.0001209029 0.0001063896 0.0000259818 0.0000279518 0.0000231529 -0.0005059114 -0.0004183541 -0.0002830694 0.0006110587 0.0002966645 -0.0006170635 -0.0013275597 -0.0012916234 -0.0008033134 -0.0001723838 -0.0001687950 0.0001164137 0.0062077288 0.0050023512 0.0028687823 -0.0074026433 -0.0038237636 0.0065331692 -0.0002941110 -0.0043468251 -0.0173091868 0.0009219591 0.0011600562 0.0029713127 -0.0140469791 -0.0174178344 -0.0462286544 0.0000006549 0.0000021920 -0.0000005382 0.0000718367 -0.0000850733 -0.0000325644 -0.0000747040 0.0000399295 0.0000883990 -0.0000094789 -0.0000348264 -0.0000242757 0.0000023077 0.0000113306 -0.0000010076 0.0000241073 -0.0000155521 -0.0000097215 0.0000349703 -0.0000347628 -0.0000326672 -0.0000005297 0.0000009736 -0.0000046863 0.0000447029 0.0000086999 -0.0000152633 -0.0001971964 -0.0001328978 -0.0000449255 -0.0002039684 0.0000837548 0.0001807171 0.0000010624 0.0000854608 0.0000140290 -0.0000925780 -0.0000148889 -0.0000484258 -0.0004503435 0.0003615128 0.0002746944 -0.0000009786 -0.0000277438 0.0001547549 0.0000275414 0.0000825274 -0.0000089677 -0.0000035684 -0.0000382125 -0.0000143521 0.0000238430 0.0000065539 0.0000101257 -0.0000066516 -0.0000218353 0.0000613454 -0.0000756366 0.0002820128 -0.0000820823 0.0004137608 -0.0000960983 0.0006774938 0.0018972821 0.0014026163 0.0000337401 -0.0000107653 -0.0000098529 0.0000014019 -0.0000718670 0.0000600928 0.0001899775 -0.0000518587 -0.0000517915 -0.0000633354 0.0000192072 0.0000121432 0.0000151123 -0.0000085060 -0.0000036163 -0.0000042822 0.0000304147 0.0000257703 0.0000170137 0.0009179489 -0.0006808054 -0.0023136731 0.0009455398 0.0005175414 0.0008886693 -0.0000785560 -0.0000401686 -0.0000970993 0.0000063154 -0.0000517380 -0.0000179476 -0.0002323653 -0.0002833787 -0.0002573261 0.0000066862 0.0000010822 0.0000142717 -0.0000019536 0.0000019082 0.0000014637 0.0000016419 -0.0000011226 -0.0000003527 -0.0000033350 0.0000024549 0.0000004226 0.0000114337 -0.0000182375 -0.0000172003 -0.0000681427 -0.0000057196 -0.0001418265 0.0000112101 -0.0000074701 -0.0000103206 -0.0000010025 0.0000001535 -0.0000054387 0.0000027313 -0.0000147818 -0.0000175144 -0.0001091952 0.0001812677 0.0001722071 0.0000073907 0.0000044964 0.0000486863 0.0000686779 0.0000619871 -0.0000670580 0.0000010914 -0.0000001427 0.0000030046 -0.0000009120 -0.0000000129 0.0000022589 0.0000060567 0.0000032859 -0.0000025147 0.0000028827 -0.0000014385 -0.0000018780 -0.0000059970 -0.0000426997 -0.0000012416 -0.0000617769 0.0000622703 0.0000420620 0.0001031687 0.0005101470 -0.0000061066 0.0006891314 -0.0007248273 -0.0004710730 -0.0000078857 -0.0000240643 0.0000033408 0.0000552291 0.0000190204 -0.0000312150 0.0000707457 0.0003046530 -0.0000195999 -0.0006513618 -0.0002456202 0.0003650580 0.0000014689 0.0000010462 0.0000008528 0.0000011948 -0.0000018317 0.0000004009 -0.0000000899 0.0000043988 -0.0000003141 0.0000054608 -0.0000030063 0.0000035641 -0.0000043334 -0.0000619223 -0.0000011658 -0.0000677772 0.0000526604 -0.0000446452 0.0000038321 0.0000198655 0.0000013743 -0.0000395730 -0.0000201467 -0.0000211262 -0.0000251033 -0.0002394279 -0.0000038988 0.0004447795 0.0002291104 0.0002369200 -0.0001214363 0.0001727067 0.0000283199 -0.0002651254 0.0000195257 0.0000416033 0.0002746182 -0.0006207838 0.0006502997 0.0015611567 -0.0012564353 -0.0010012543 -0.0003743175 0.0006690840 0.0003351389 0.0002873088 -0.0012350028 0.0013636876 -0.0012925932 -0.0010493570 -0.0020734659 0.0057799980 -0.0059129360 -0.0035110407 0.0000521281 -0.0001114809 -0.0000199686 -0.0118226273 -0.0473585208 -0.0007600577 0.0009001425 0.0042138621 0.0001320045 0.0001083290 -0.0000409475 -0.0000530328 -0.0000727046 -0.0001556233 0.0000077842 0.0000023014 -0.0000017426 -0.0000097005 -0.0000079442 -0.0000043132 -0.0000300488 0.0000677496 0.0006046609 0.0000490722 -0.0000171889 -0.0000228515 -0.0000020199 -0.0004366034 -0.0069348630 -0.0003946937 -0.0000041780 -0.0000015282 0.0000004644 -0.0000071836 0.0000111993 -0.0000046673 0.0000090479 0.0000042899 0.0000074007 -0.0000016670 -0.0000025300 -0.0000022074 -0.0000102503 -0.0000083576 -0.0000066523 -0.0021296729 -0.0010045002 -0.0008376651 -0.0000066842 0.0011668214 0.0016964664 -0.0000004897 -0.0001037483 -0.0001493397 -0.0000109130 -0.0000060930 -0.0000002803 -0.0000174868 -0.0000034529 0.0000288736 0.0000035555 0.0000104975 0.0000111278 0.0000758376 0.0000257574 -0.0000967010 0.0000020319 0.0000034489 0.0000007886 0.0002624454 0.0001008975 -0.0003313640 -0.0000932219 -0.0001211354 -0.0000193051 -0.0008179706 -0.0003067571 0.0010775903 0.0001793558 0.0000726855 0.0000578236 -0.0003839857 -0.0002275887 -0.0001242671 0.0042615510 0.0026114601 0.0014189262 -0.0000311005 -0.0000092724 0.0000472328 0.0000344305 0.0002820255 0.0010774814 0.0008444622 0.0007180874 0.0003986323 0.0000178363 0.0000123169 -0.0000059836 -0.0003907235 -0.0003258649 -0.0002239107 -0.0000482489 -0.0000471240 -0.0000584723 -0.0095123904 -0.0081836187 -0.0045923896 -0.0003030843 -0.0001435774 0.0002558221 0.0048172425 0.0038857148 0.0022382825 0.0001694886 0.0001084584 -0.0000414490 -0.0002380451 -0.0031178909 -0.0123928741 0.0000082353 0.0000071015 0.0000267071 -0.0001182495 -0.0001400110 -0.0004262311 -0.0000021445 0.0000083063 -0.0000003772 -0.0000041272 0.0000060457 0.0000009338 0.0000079145 -0.0000000820 -0.0000080867 0.0000006120 0.0000015622 0.0000024369 -0.0000003703 -0.0000002256 -0.0000003135 0.0000013155 0.0000074923 0.0000013828 0.0000006936 -0.0000019966 0.0000038657 0.0000021277 0.0000004367 0.0000013338 -0.0000025383 -0.0000037755 0.0000015926 0.0000093817 0.0000211282 -0.0000042735 0.0000054409 0.0000040226 -0.0000049156 -0.0000104493 -0.0000921195 -0.0000011499 -0.0000157915 -0.0000032225 -0.0000072885 -0.0000072319 0.0000105210 -0.0000007115 0.0000011040 0.0000326976 -0.0000488938 0.0000022430 -0.0000125826 0.0000052544 -0.0000000369 -0.0000034871 -0.0000013271 -0.0000247165 -0.0000008916 -0.0000118748 0.0000012721 0.0000021734 -0.0000025400 0.0000362061 -0.0001230255 0.0000258752 0.0000206250 0.0000109765 0.0000328158 -0.0001688556 -0.0001185878 -0.0000070344 0.0000364851 0.0000500563 0.0000029325 0.0001427346 -0.0001303484 -0.0003562348 0.0000149412 0.0000194615 0.0000320800 -0.0000118216 -0.0000050029 0.0000002309 -0.0000015245 0.0000126041 0.0000223182 -0.0000079560 0.0000105498 0.0000318632 -0.0018152728 0.0013682776 0.0041430255 -0.0003410402 -0.0003479592 -0.0003685521 0.0000118242 0.0000046433 -0.0000007234 0.0000790795 -0.0000749871 -0.0002142838 -0.0001850046 -0.0002372023 -0.0002647444 -0.0000157576 -0.0000057896 -0.0000325519 0.0000000883 -0.0000007225 0.0000002393 0.0000013469 -0.0000007001 0.0000002229 -0.0000000170 0.0000011287 0.0000022610 0.0000031447 -0.0000030272 0.0000005724 0.0002060651 0.0000439305 0.0003821785 0.0000097003 -0.0000098763 -0.0000098578 0.0000001559 0.0000003640 -0.0000010280 -0.0000048406 -0.0000035311 -0.0000220038 0.0000008442 0.0000085448 -0.0000009828 -0.0000022498 -0.0000007578 0.0000019101 -0.0000044958 -0.0000008556 -0.0000032024 0.0000000912 0.0000000774 0.0000002561 -0.0000003592 0.0000000937 0.0000000102 0.0009412803 -0.0007974953 -0.0005845510 0.0001885534 -0.0002417016 -0.0001884828 0.0101008695 0.0379721300 -0.0014568257 -0.0202815586 0.0153045439 0.0131874587 -0.0995409581 -0.4250661458 0.0080501281 0.2052790964 -0.2089863616 -0.1389856402 -0.0062968786 -0.0176294629 0.0023213886 0.0565191970 0.0205902782 -0.0320079249 0.0518197269 0.2271745300 -0.0106964651 -0.6484109679 -0.2491690393 0.3663840090 0.0000019921 -0.0000814708 -0.0001181676 -0.0001736229 -0.0000280755 -0.0000976907 0.0000222787 -0.0030907879 0.0002124100 -0.0071208365 0.0058428385 -0.0046523373 0.0037054950 0.0374555163 -0.0007769299 0.0814932609 -0.0683537054 0.0532672631 0.0004043563 0.0064266074 -0.0000730864 0.0032628906 0.0009268170 0.0017948430 -0.0066312422 -0.0715971963 -0.0004166874 -0.0349351225 -0.0171874569 -0.0187280917 0.0000099758 0.0000070573 -0.0000045023 -0.0000999498 -0.0000594961 0.0000381517 0.0000050123 -0.0000145052 0.0000111893 -0.0000147308 0.0000145040 0.0000125788 0.0000185588 -0.0000438207 -0.0000385636 0.0000092673 -0.0000020426 -0.0000089405 0.0001421799 0.0001513981 0.0002637959 -0.0003864936 0.0004108158 0.0001869000 -0.0000102716 0.0000140474 0.0000076360 0.0005997706 0.0025918934 0.0000652609 -0.0000451736 -0.0002302173 -0.0000115704 -0.0000113189 0.0000053571 0.0000070189 0.0000457010 -0.0000378549 -0.0000221815 0.0000474166 0.0000204705 0.0000270856 -0.0000085097 0.0000014778 -0.0000050852 0.0000094168 0.0000640175 0.0000056481 -0.0000120104 -0.0000039585 -0.0000066754 -0.0001015355 -0.0007718717 -0.0000674706 -0.0000772960 -0.0000411826 -0.0000016881 -0.0000695976 0.0000286531 -0.0000232279 0.0001083372 0.0000769512 0.0000490722 -0.0000071797 -0.0000447079 -0.0000212259 -0.0000765746 -0.0000931836 -0.0000846479 -0.0084338246 -0.0043699588 -0.0028171211 -0.0000182012 0.0242909165 0.0355142184 0.0000422571 -0.0020736801 -0.0031139096 -0.0001511505 -0.0002059448 -0.0001182784 -0.0009567554 -0.0003048698 0.0011771948 0.0001065851 0.0003257432 0.0002969146 0.0022017121 0.0007927702 -0.0028028108 0.0000412114 0.0000834867 0.0000089306 0.0115821516 0.0039563998 -0.0137194962 -0.0024240680 -0.0033037686 -0.0004369143 -0.0240768919 -0.0092162736 0.0315535334 0.0009030154 0.0001973491 0.0000537342 -0.0100141256 -0.0058403471 -0.0031398100 0.1138152761 0.0684496153 0.0362129747 -0.0016733413 -0.0005343940 0.0021134698 0.0016877341 0.0139641854 0.0533735493 0.0429986461 0.0365582132 0.0202789355 0.0010920792 0.0006956981 -0.0005053840 -0.0191050928 -0.0159491387 -0.0109702835 -0.0027672467 -0.0025482437 -0.0026400424 -0.4846067121 -0.4167916167 -0.2336343865 -0.0168595935 -0.0086032246 0.0141217595 0.2356757653 0.1902468995 0.1095591087 0.0124774559 0.0074495437 -0.0055042776 -0.0118244288 -0.1545083761 -0.6136211862 0.0004220446 0.0005006123 0.0014222321 -0.0065479039 -0.0078984850 -0.0221019427 -0.0000002735 0.0000047300 -0.0000000797 -0.0001212568 0.0001098185 0.0000289315 0.0002659820 0.0000675396 -0.0002277350 0.0000090863 0.0000350680 0.0000553628 -0.0000263775 -0.0000148547 -0.0000068037 -0.0000159661 -0.0000008230 0.0000005522 0.0000675539 -0.0001543637 0.0001307321 0.0000159748 0.0000097417 -0.0000111346 -0.0000608058 -0.0001522732 0.0000637843 0.0001205595 0.0008410377 -0.0002771302 0.0000860429 -0.0000645209 -0.0001204058 -0.0000115440 0.0000922625 -0.0000070289 0.0002425718 0.0000293643 0.0001399690 -0.0007414942 0.0006915773 0.0003302015 -0.0000243236 0.0011036012 -0.0018509718 0.0001585600 0.0002736205 0.0001360448 -0.0000350726 0.0000033469 0.0000050187 -0.0000214859 0.0000209275 -0.0000580189 0.0000177630 -0.0001179851 0.0002019489 0.0016610071 -0.0059226669 0.0011453085 0.0016141048 0.0003247666 0.0027007732 -0.0051190739 -0.0035380491 -0.0003116784 -0.0000012487 -0.0000091939 -0.0000079583 -0.0000675062 0.0000470889 0.0001518322 -0.0000081013 -0.0000098282 -0.0000173174 -0.0000013864 -0.0000341453 -0.0000152122 -0.0001728480 0.0001311986 0.0003707755 0.0000330754 0.0000275695 0.0000140910 0.0007338897 -0.0005866725 -0.0017972564 0.0001689404 0.0000950626 0.0000963259 0.0001535498 0.0000287360 0.0000900562 0.0017794055 -0.0013699249 -0.0038423994 -0.0001974621 -0.0003226445 -0.0002022182 0.0000004436 -0.0000025490 -0.0000037852 -0.0000062709 0.0000073980 0.0000052094 0.0000046032 -0.0000029346 0.0000005686 -0.0000059220 0.0000023284 -0.0000022303 0.0000167848 -0.0000277142 -0.0000263668 0.0000269741 0.0000165063 0.0000709321 0.0000463989 -0.0000670180 -0.0000726100 -0.0000116645 0.0000060182 -0.0000053930 0.0000070781 0.0000015985 0.0000105457 -0.0001614991 0.0003120230 0.0002869342 -0.0000161059 0.0000005264 -0.0000116829 -0.0000955700 0.0000472215 -0.0000615690 0.0000047093 -0.0000012112 0.0000041446 0.0000036581 -0.0000032387 0.0000000058 -0.0000141108 0.0000172174 0.0000108714 -0.0000000944 0.0000015916 0.0000014759 -0.0001883441 -0.0007355525 0.0000239256 0.0002934494 -0.0001964641 -0.0001883484 0.0019229757 0.0082462903 -0.0001529890 -0.0028948162 0.0029091208 0.0019551943 0.0001153160 0.0003150792 -0.0000423095 -0.0010894936 -0.0004006807 0.0006165533 -0.0009279756 -0.0040708369 0.0001879947 0.0124560636 0.0047950246 -0.0070385618 0.0000069852 0.0000050218 0.0000065696 0.0000200723 0.0000025827 0.0000101864 -0.0000079494 0.0002425463 -0.0000249606 0.0006400834 -0.0005120573 0.0004164921 -0.0002839442 -0.0030065290 0.0000777523 -0.0072888509 0.0061001667 -0.0047647820 -0.0000314922 -0.0005894849 0.0000101216 -0.0004333621 -0.0001543035 -0.0002360587 0.0005924739 0.0065097403 0.0000331683 0.0046908484 0.0023421380 0.0025120171 0.0001634044 0.0001426551 -0.0000824436 -0.0016543683 -0.0009630035 0.0005103748 0.0000228393 -0.0002701586 0.0002583428 -0.0000939523 0.0000252258 0.0001316671 -0.0000085251 0.0000799278 0.0000157364 0.0001296638 -0.0001908116 0.0002467505 -0.0003185638 -0.0000936992 -0.0002812999 0.0003933112 -0.0004153034 -0.0004483208 0.0000008529 -0.0000061501 -0.0000012800 -0.0015924011 -0.0063187362 -0.0000852235 0.0001266024 0.0005669604 0.0000129528 0.0000401740 -0.0000052891 0.0000148344 -0.0000195111 -0.0000445613 0.0000127878 -0.0000180725 0.0001693291 -0.0000008387 0.0001233518 -0.0000099256 0.0000448999 -0.0003508141 -0.0034806315 -0.0002530161 0.0000412836 0.0000853436 0.0000015493 0.0023680726 0.0394657227 0.0021414948 -0.0000085661 -0.0000081250 0.0000020504 -0.0000026910 0.0000018893 -0.0000031797 0.0000067380 0.0000030641 0.0000018404 -0.0000029500 -0.0000004614 -0.0000002113 -0.0000067004 -0.0000045909 -0.0000035999 -0.0010342424 -0.0004812127 -0.0004134841 -0.0000014571 0.0001194851 0.0001838194 0.0000005627 -0.0000108640 -0.0000164091 -0.0000031498 -0.0000015422 0.0000005451 -0.0000078376 -0.0000023706 0.0000104398 -0.0000118367 -0.0000147211 0.0000000168 0.0000058088 0.0000018201 -0.0000071002 0.0000007007 0.0000003367 -0.0000003709 0.0000962470 0.0000310546 -0.0001132393 0.0001303448 0.0001611169 0.0000124357 -0.0000595456 -0.0000230139 0.0000870166 0.0000810994 0.0000396944 0.0000331099 -0.0000265169 -0.0000220288 -0.0000126192 0.0002800966 0.0001994763 0.0001274391 0.0000205508 0.0000077408 -0.0000200395 -0.0000205663 -0.0001541058 -0.0005853563 -0.0005043837 -0.0004280220 -0.0002364779 -0.0000132943 -0.0000085605 0.0000062432 0.0002314893 0.0001927800 0.0001307268 0.0000563248 0.0000418600 0.0000081046 0.0056905639 0.0048903380 0.0027380736 0.0002004259 0.0001081898 -0.0001614533 -0.0028343567 -0.0022849959 -0.0013189971 -0.0004275147 -0.0002321932 0.0003156248 0.0001337299 0.0016965403 0.0067310044 0.0000013885 0.0000014986 0.0000048561 -0.0000166995 -0.0000263428 -0.0000794442 0.0000173846 -0.0000499109 -0.0000018739 -0.0000027171 0.0000037078 0.0000015207 0.0000009975 -0.0000039185 -0.0000053507 0.0000010325 0.0000037089 0.0000025119 0.0000001320 -0.0000015682 -0.0000006559 0.0000030088 -0.0000010445 -0.0000005636 -0.0000045002 0.0000053205 0.0000035578 -0.0000019157 -0.0000022324 0.0000012653 -0.0000016466 0.0000012719 0.0000003042 0.0000000640 -0.0000121105 0.0000013393 -0.0000201701 0.0000060253 0.0000186560 0.0000071148 0.0000204219 -0.0000051014 -0.0000221589 -0.0000106234 -0.0000104780 0.0000594636 -0.0000455495 -0.0000380871 -0.0000031698 -0.0000115001 -0.0000001280 -0.0000051807 -0.0000078618 -0.0000116224 0.0000037736 0.0000232932 0.0000023127 0.0000152548 0.0000002544 0.0000052093 -0.0000001742 0.0000116100 -0.0000237564 -0.0000296555 0.0000976009 -0.0000172516 -0.0000114945 -0.0000068001 -0.0000138122 0.0000536576 0.0000361297 0.0000056725 0.0000063150 0.0000069732 0.0000004990 0.0000155904 -0.0000152515 -0.0000405164 -0.0000001855 -0.0000007534 0.0000006721 -0.0000028393 -0.0000003868 0.0000008537 0.0000022648 0.0000003800 -0.0000015805 -0.0000017970 0.0000018734 0.0000050937 -0.0002085192 0.0001575750 0.0004816813 -0.0000173413 -0.0000062430 -0.0000112594 0.0000020767 0.0000003576 -0.0000018573 -0.0000068292 0.0000058232 0.0000206833 -0.0000214935 -0.0000372224 -0.0000363577 0.0000979862 0.0000375281 0.0002072468 0.0000081761 -0.0000089038 -0.0000148509 -0.0000113992 0.0000068570 -0.0000015056 -0.0000016423 -0.0000076499 -0.0000153731 -0.0000060032 -0.0000095785 -0.0000350533 -0.0013047187 -0.0002682011 -0.0024545074 -0.0001446173 0.0002097004 0.0002155904 0.0000092646 -0.0000071356 0.0000003765 0.0000578015 0.0000173303 0.0001376955 -0.0001400664 0.0002789730 0.0003302174 -0.0000009924 0.0000001360 0.0000012324 -0.0000003050 -0.0000011370 0.0000003938 -0.0000023572 0.0000013254 -0.0000017951 -0.0000027675 0.0000031755 0.0000025420 0.0001516121 -0.0001673872 -0.0000912932 0.0000576740 -0.0000099346 0.0000485093 0.0015572544 0.0058667545 -0.0002280889 -0.0034083107 0.0026783316 0.0022211927 -0.0153489105 -0.0654473355 0.0012591640 0.0348909952 -0.0356022899 -0.0236215865 -0.0008165348 -0.0019506280 0.0004161622 0.0086577073 0.0030596631 -0.0049035760 0.0061911190 0.0269173003 -0.0013064160 -0.0989027992 -0.0379478232 0.0559347280 0.0001751683 0.0002095047 0.0001065870 0.0012820176 0.0004821422 0.0006616409 -0.0007668966 0.0153145792 -0.0017962814 0.0469067940 -0.0377336434 0.0305337149 -0.0187687950 -0.1927065689 0.0041187575 -0.5323986646 0.4460797153 -0.3482507257 -0.0026866515 -0.0423825334 0.0005017893 -0.0241221353 -0.0075821816 -0.0131844928 0.0434364607 0.4706751298 0.0026187722 0.2597787084 0.1283441557 0.1391659941 0.0000017532 0.0000010516 -0.0000001423 -0.0000177267 -0.0000161389 0.0000097445 0.0000006279 -0.0000015490 0.0000004549 -0.0000004696 -0.0000037003 0.0000000059 -0.0000084959 0.0000161589 0.0000123152 -0.0000001433 -0.0000019004 0.0000071298 -0.0000419901 -0.0000423029 -0.0000834093 0.0001499241 -0.0001627718 -0.0000689675 0.0000210300 -0.0000275591 -0.0000180098 -0.0008342858 -0.0038797744 -0.0001232847 0.0000587931 0.0003374458 0.0000181816 0.0000278173 -0.0000146259 -0.0000178318 -0.0001479383 0.0001406985 0.0000734185 -0.0001485603 -0.0000548289 -0.0000882063 0.0000311307 0.0000006501 0.0000178686 -0.0000342270 -0.0002409265 -0.0000209310 0.0000392972 0.0000157079 0.0000182316 0.0003032347 0.0028732751 0.0002208596 0.0002520167 0.0001508622 0.0000280531 0.0002240284 -0.0000870432 0.0001035029 -0.0003215530 -0.0003487259 -0.0002789313 0.0000103330 0.0002153944 0.0001383034 0.0003508063 0.0004145280 0.0003448655 0.0432208565 0.0220024273 0.0163753768 0.0007230555 -0.2448349359 -0.3589426960 -0.0008194186 0.0209007666 0.0320595713 0.0016788883 0.0023178835 0.0008248774 0.0116614442 0.0031719738 -0.0150556973 0.0118924333 0.0125891896 -0.0026219544 -0.0348894892 -0.0134612129 0.0445072159 0.0002355053 0.0001091329 0.0000698272 -0.1433805390 -0.0484696819 0.1701362917 -0.1241268704 -0.1539253444 -0.0061658176 0.3921260290 0.1471252782 -0.5145572201 -0.0046902147 -0.0015812235 -0.0011039350 0.0362853408 0.0211439924 0.0118631194 -0.4052219244 -0.2464793853 -0.1370165325 -0.0004492760 -0.0002934516 -0.0007197462 0.0002894601 0.0014144007 0.0050621309 0.0062448838 0.0052202454 0.0026978224 0.0007902948 0.0003564627 -0.0008116821 -0.0026293529 -0.0021890271 -0.0014172775 -0.0034746353 -0.0019105750 0.0024699574 -0.0709890401 -0.0604176092 -0.0327174730 -0.0094495107 -0.0053043602 0.0079320608 0.0317991935 0.0256034249 0.0146512093 0.0368999521 0.0192081891 -0.0314530823 -0.0013820390 -0.0146447609 -0.0575602182 -0.0016093213 -0.0018809366 -0.0051158023 0.0234383326 0.0284131803 0.0800624519 -0.0000015244 -0.0000108630 0.0000029877 0.0001099442 -0.0002384308 -0.0000642361 -0.0000801538 0.0001725463 0.0003988912 -0.0001040396 -0.0002036593 -0.0002066091 0.0000432186 0.0000598227 0.0000228504 0.0000521853 -0.0000105540 -0.0000008076 -0.0002351711 0.0001646993 0.0002510172 0.0000206407 0.0000026933 0.0000077894 0.0000179150 0.0000274763 0.0000006880 -0.0004148215 -0.0000456050 -0.0001626931 -0.0001769827 0.0001736938 0.0002268517 0.0000410621 -0.0001825962 0.0000354415 -0.0006373118 -0.0000734321 -0.0003299073 0.0028880511 -0.0021175286 -0.0016898665 0.0000372529 0.0004990015 -0.0014507524 -0.0002348526 -0.0005626167 -0.0000126008 -0.0000099385 -0.0003027470 -0.0001125703 -0.0004026741 0.0000521774 -0.0001158696 0.0000262274 0.0000213609 -0.0000023873 0.0002716896 -0.0010526184 0.0000942816 0.0014426131 -0.0002852426 0.0021898222 0.0028708101 0.0021396540 -0.0000372796 0.0000070773 0.0000237807 -0.0000158470 -0.0000096467 0.0000155873 0.0000467535 -0.0001534824 -0.0001830522 -0.0002224439 -0.0000651280 -0.0000220156 0.0000051128 -0.0000078058 0.0000460782 0.0000966980 -0.0000911291 -0.0000957261 -0.0000752038 0.0001769676 -0.0000716929 -0.0002215125 0.0012843530 0.0021271503 0.0017549106 0.0002626611 0.0000988576 0.0002620930 0.0004273324 -0.0002299595 -0.0008806788 0.0008232162 0.0010028257 0.0008963190 -0.0000688853 -0.0000072251 -0.0001288620 0.0000048318 0.0000083277 0.0000231560 -0.0000180338 0.0000102946 -0.0000038023 0.0000139398 -0.0000124730 -0.0000076067 -0.0000657754 0.0001079553 0.0001044038 0.0007030606 0.0000999933 0.0014108022 0.0001002430 -0.0001587671 -0.0001755783 0.0000436550 -0.0000201640 0.0000145018 0.0000568796 0.0000127266 0.0000981995 0.0006357585 -0.0012215090 -0.0011647949 -0.0000275301 -0.0000172731 -0.0001092505 -0.0002012245 -0.0000865613 0.0000708619 -0.0000177579 0.0000034045 -0.0000139364 -0.0000164021 0.0000076012 0.0000028570 -0.0000055308 -0.0000088556 0.0000011963 -0.0000099219 0.0000110436 0.0000075090 -0.0000009350 0.0000881753 0.0000103549 0.0002573757 -0.0002817573 -0.0001768606 -0.0002096051 -0.0010354012 0.0000148959 -0.0028571858 0.0030395215 0.0019554366 -0.0000274877 -0.0000783337 0.0000100244 0.0002951321 0.0001267524 -0.0001652327 0.0002046057 0.0009748137 -0.0000412262 -0.0032817581 -0.0012945747 0.0018597969 -0.0000110526 -0.0000074297 -0.0000064261 -0.0000031947 0.0000081597 -0.0000015678 0.0000024326 0.0000743658 -0.0000059390 0.0001721043 -0.0001594521 0.0001130312 -0.0001063629 -0.0008702134 0.0000211170 -0.0019561493 0.0016750581 -0.0012831401 -0.0000198233 -0.0000384851 -0.0000100383 0.0002752436 0.0001469873 0.0001465589 0.0000693001 0.0005389696 0.0000142194 -0.0030331280 -0.0015729133 -0.0016194907 -0.0001539580 -0.0004253338 0.0000166991 0.0026904523 0.0009210350 -0.0008636896 0.0000769017 0.0004699591 -0.0005853425 -0.0018918341 0.0016520933 0.0010259883 0.0004283731 -0.0002986805 0.0003614969 -0.0009420865 0.0018465589 -0.0020978538 -0.0016073936 -0.0024452802 -0.0035689940 -0.0030263876 0.0032199486 0.0025356675 0.0000362552 -0.0000395763 -0.0000280247 -0.0013201232 -0.0062801949 -0.0002000414 0.0000920220 0.0005413348 0.0000253605 0.0000411134 -0.0000238552 -0.0000270293 -0.0002324389 0.0002265621 0.0001137975 -0.0002321118 -0.0000856107 -0.0001399445 0.0000481416 0.0000023719 0.0000279506 -0.0000432354 -0.0002781908 -0.0000239549 0.0000589509 0.0000216105 0.0000266331 0.0003849886 0.0033817266 0.0002743892 0.0004048900 0.0002464131 0.0000468516 0.0003538868 -0.0001351272 0.0001690357 -0.0005130612 -0.0005798101 -0.0004662156 0.0000037419 0.0003547839 0.0002290133 0.0005711636 0.0006802896 0.0005363433 0.0815487850 0.0425962861 0.0333687417 -0.0008390242 0.1338144405 0.1972976965 0.0007790068 -0.0113450756 -0.0179363819 -0.0001332189 -0.0003854853 0.0002810481 -0.0097444443 -0.0022616597 0.0130111174 -0.0146277797 -0.0172497291 0.0005033968 0.0183112564 0.0077607088 -0.0231749668 -0.0008200435 -0.0012988738 -0.0004525200 0.1210384447 0.0405011568 -0.1438077750 0.1606187052 0.2016799087 0.0104006730 -0.2108598165 -0.0781350884 0.2758291450 -0.0080217254 -0.0027366808 -0.0022138044 0.0592860372 0.0344214077 0.0194371570 -0.6645169089 -0.4039405183 -0.2229429673 -0.0005713052 -0.0004515183 -0.0014234893 0.0004843382 0.0011052604 0.0032153113 0.0036478798 0.0029447211 0.0012461770 0.0015934411 0.0007672000 -0.0015030915 -0.0045687651 -0.0037373879 -0.0021946646 -0.0064410105 -0.0033614826 0.0053521013 -0.0421369748 -0.0354384901 -0.0178561458 -0.0180178033 -0.0101033881 0.0150555414 0.0531332977 0.0426972692 0.0241699567 0.0707719640 0.0366162384 -0.0613403550 -0.0013328905 -0.0095890165 -0.0365952916 -0.0023149225 -0.0027781756 -0.0081127239 0.0378279856 0.0455365008 0.1263935520 -0.0000046462 -0.0000134099 0.0000082544 0.0002286616 -0.0004726704 -0.0001468274 -0.0002536112 0.0003459040 0.0007999256 -0.0001842998 -0.0003986005 -0.0003940008 0.0000759685 0.0001245051 0.0000432242 0.0000976279 -0.0000291101 -0.0000040018 -0.0003757849 0.0002554517 0.0003912221 0.0000292163 0.0000009282 0.0000032488 0.0000879370 0.0000684999 -0.0000374047 -0.0006763085 -0.0001251603 -0.0001563777 -0.0003567123 0.0003747190 0.0004341460 0.0000722943 -0.0003510376 0.0000712836 -0.0011327733 -0.0001034451 -0.0005852907 0.0046184515 -0.0033278857 -0.0026478704 0.0000717717 0.0007900532 -0.0022646995 -0.0003987094 -0.0009397015 -0.0000426880 -0.0000143996 -0.0005469288 -0.0002065161 -0.0005844243 0.0000978705 -0.0001423269 0.0000271019 0.0000287160 0.0000441365 0.0004082535 -0.0014451990 0.0000229493 0.0017972748 -0.0004617499 0.0025515791 0.0051011607 0.0037405179 -0.0000352189 -0.0000405942 -0.0000067252 -0.0000429282 -0.0007192829 0.0005130591 0.0016592782 -0.0000552459 -0.0001282853 -0.0002437439 -0.0000465281 -0.0000076915 0.0000318364 -0.0000065728 0.0000424130 0.0000875938 -0.0001058714 -0.0001361200 -0.0001287117 0.0080298988 -0.0059102349 -0.0187225606 0.0023586526 0.0017621070 0.0025699515 0.0001834728 0.0000547349 0.0001992353 0.0004722905 -0.0003800643 -0.0010778224 0.0011333548 0.0013735596 0.0011809276 -0.0001903803 -0.0000286025 -0.0003672566 -0.0000045464 0.0000417834 0.0000756570 -0.0000318424 0.0000186760 -0.0000061886 0.0000170586 -0.0000257289 -0.0000284897 -0.0001278577 0.0002112744 0.0002090701 0.0020472819 0.0003352701 0.0040914157 0.0003899025 -0.0006200334 -0.0006909982 0.0000746334 -0.0000313147 0.0000229769 0.0002014382 0.0000630452 0.0003392351 0.0012737369 -0.0023911851 -0.0023296919 -0.0000072501 -0.0000270572 -0.0000682634 -0.0001142000 0.0000634580 -0.0002457842 -0.0000301674 0.0000041280 -0.0000225423 -0.0000288915 0.0000110298 0.0000057351 -0.0000155684 -0.0000069318 0.0000061443 -0.0000127598 0.0000185410 0.0000105311 -0.0000857096 -0.0001379467 0.0000324473 0.0006551307 -0.0006843117 -0.0004459582 0.0004023902 0.0014165639 -0.0000446990 -0.0071631606 0.0075634182 0.0048899539 -0.0000614719 -0.0001866022 0.0000217346 0.0005279168 0.0002416379 -0.0002943151 0.0005018173 0.0023102062 -0.0000888178 -0.0058727463 -0.0023355062 0.0033267944 -0.0000165805 -0.0000142724 -0.0000093925 -0.0000108180 0.0000081501 -0.0000058803 0.0000002797 0.0001374829 -0.0000129790 0.0003490989 -0.0003321902 0.0002305546 -0.0001919192 -0.0016525963 0.0000286481 -0.0039871249 0.0034177328 -0.0026129018 -0.0000237115 0.0001861619 -0.0000227732 0.0006846312 0.0003495002 0.0003657486 -0.0001286304 -0.0018384145 0.0000154359 -0.0075015469 -0.0038748131 -0.0040039666 -0.0002928916 -0.0001997367 -0.0000502400 0.0013412760 -0.0000484354 -0.0004383769 0.0008740045 -0.0012503002 0.0008327624 -0.0003040410 0.0005857176 -0.0002608556 0.0005052177 -0.0001373711 0.0007607737 -0.0013915173 0.0021023978 -0.0024509489 -0.0033325556 -0.0046553438 -0.0070881629 -0.0020003082 0.0022146852 0.0025132861 -0.0001413135 -0.0000371831 -0.0001778443 0.0097788616 0.0451853187 0.0011174237 -0.0007511545 -0.0039063930 0.0000281774 0.0000842687 -0.0000148142 -0.0000298357 -0.0001466470 -0.0000596647 0.0000936514 0.0000038678 0.0000043233 -0.0000020929 -0.0000140389 -0.0000010544 -0.0000037447 -0.0000002691 -0.0000049464 0.0000000673 0.0000002125 -0.0000009458 0.0000009796 0.0000104582 0.0000802479 0.0000069389 0.0000004064 0.0000031554 0.0000092967 -0.0000039514 -0.0000085087 0.0000232092 -0.0000111780 -0.0000110767 -0.0000370372 -0.0000019513 0.0000092786 0.0000173326 0.0000072745 0.0000486533 0.0000461615 0.0006100940 0.0002147697 -0.0000889523 -0.0000205333 0.0028046687 0.0041286649 -0.0000227065 -0.0002743002 -0.0003629947 -0.0000169776 -0.0000694772 -0.0000049479 0.0001495561 0.0000933553 -0.0001227744 -0.0003059178 -0.0003811466 -0.0000057828 0.0005260323 0.0002199649 -0.0005716083 0.0000415180 0.0000196641 0.0000091652 -0.0014384667 -0.0004935747 0.0016544859 0.0034638518 0.0042987270 0.0002255031 -0.0055806662 -0.0021866159 0.0072621335 -0.0000825738 -0.0000075488 0.0000232453 0.0013575375 0.0007784350 0.0004199948 -0.0151812159 -0.0091631868 -0.0050827949 -0.0000138481 -0.0000094641 -0.0000370484 0.0000399195 0.0000798378 0.0002271944 0.0000340853 0.0000158920 -0.0000148477 0.0001255493 0.0000680837 -0.0000960385 -0.0003510698 -0.0002887772 -0.0001675973 -0.0004532906 -0.0002332186 0.0003906921 -0.0004081641 -0.0002662034 -0.0001193423 -0.0014517370 -0.0007354989 0.0011757497 0.0040845656 0.0033216225 0.0018698708 0.0050118050 0.0026078487 -0.0043761146 -0.0000980668 -0.0006664124 -0.0025571083 -0.0000189658 -0.0000061275 0.0000009441 0.0000863426 -0.0005753123 -0.0000408832 0.0000016616 -0.0000010212 0.0000003078 -0.0000044730 0.0000007227 0.0000008764 0.0000052086 0.0000011146 0.0000001727 -0.0000016147 -0.0000019466 -0.0000000080 0.0000004771 0.0000017756 -0.0000015661 0.0000085440 0.0000007679 -0.0000017792 -0.0000039439 0.0000056130 0.0000056620 0.0000003491 0.0000020432 -0.0000011827 -0.0000055538 -0.0000007281 0.0000032537 -0.0000044323 0.0000114635 -0.0000107453 -0.0000625994 0.0000312286 0.0000563519 -0.0000047227 -0.0000367307 0.0000009038 -0.0000406825 -0.0000101248 -0.0000200462 0.0000642003 -0.0000372951 -0.0000470072 -0.0000001534 0.0000272492 -0.0000137272 -0.0000161860 -0.0000630168 0.0000024653 -0.0000043836 -0.0000208031 -0.0000064644 0.0000009095 0.0000002236 -0.0000000206 -0.0000046707 -0.0000115055 0.0000273947 0.0000269691 -0.0001070526 0.0000218662 0.0000525608 -0.0000042887 0.0000969625 -0.0000312041 -0.0000180977 -0.0000038982 0.0023804240 0.0021911551 0.0018634119 0.0318299700 -0.0247181340 -0.0764490056 0.0037193017 0.0067070587 0.0094170960 0.0002170506 0.0001378420 0.0000505815 0.0005309906 -0.0006687399 -0.0016495260 -0.0003094923 0.0000670292 0.0003892492 -0.3668431028 0.2764076935 0.8684956049 -0.0823615419 -0.0873858314 -0.0971505453 -0.0000210865 0.0000607836 0.0001668491 -0.0087124948 0.0068404719 0.0189953429 0.0005743813 -0.0002570161 -0.0006379061 0.0000045056 0.0000017404 0.0000111311 -0.0000004616 0.0000008821 0.0000012974 -0.0000010216 0.0000003606 -0.0000007223 0.0000031107 0.0000007681 0.0000057732 0.0000011611 -0.0000033880 -0.0000047930 -0.0000607773 -0.0000112144 -0.0001289270 0.0000039837 -0.0000053720 -0.0000072437 0.0000027235 -0.0000016489 -0.0000015998 -0.0000314464 -0.0000122225 -0.0000668389 -0.0000220453 0.0000337039 0.0000487949 0.0000222666 -0.0000110511 -0.0000412356 0.0000713468 -0.0000288200 -0.0001140031 -0.0000005434 0.0000005209 0.0000002570 -0.0000015415 0.0000009645 0.0000012755 0.0000663280 0.0000442195 -0.0000166440 -0.0000271944 0.0000591861 0.0000159341 0.0000162397 -0.0000935065 -0.0000139250 -0.0001357639 0.0001232124 0.0000890821 0.0000870458 0.0009912274 0.0000749930 0.0013584007 -0.0014711206 -0.0009334839 0.0000591871 0.0001367816 -0.0000270290 -0.0002202204 -0.0000712529 0.0001272286 -0.0003874234 -0.0016827726 0.0000693104 0.0024396428 0.0009636785 -0.0013771302 -0.0000013485 -0.0000009351 0.0000011399 -0.0000029767 0.0000001448 -0.0000021633 -0.0000013439 0.0000097247 -0.0000006724 0.0000615630 -0.0000577935 0.0000409332 -0.0000230553 -0.0001388065 -0.0000205538 -0.0007055373 0.0006029532 -0.0004627299 -0.0000012406 0.0000452668 -0.0000028345 0.0001030220 0.0000532524 0.0000550054 -0.0000375191 -0.0004648367 -0.0000014976 -0.0011308977 -0.0005821081 -0.0006051731 0.0000147527 -0.0000180020 -0.0000131081 -0.0000351090 -0.0000519027 0.0000157013 0.0000106111 0.0000062139 0.0000086988 -0.0001775852 0.0001627622 0.0001195554 -0.0000052128 0.0000176489 0.0000255377 -0.0000226090 -0.0000219337 0.0000135849 -0.0000980523 -0.0000958933 -0.0001793355 0.0001823370 -0.0001807549 -0.0000949927 0.0000071466 -0.0000050847 -0.0000090707 0.0000087772 -0.0001043369 -0.0000224144 0.0000008490 0.0000036126 0.0000003227 0.0000077645 -0.0000084194 -0.0000049114 -0.0000393878 0.0000401221 0.0000253033 -0.0000367762 -0.0000151050 -0.0000180922 0.0000077164 0.0000012530 0.0000031780 0.0000001606 0.0000052641 -0.0000009129 0.0000043034 0.0000024145 0.0000035659 0.0000074105 -0.0000511324 0.0000062357 0.0000548790 0.0000146623 -0.0000110784 0.0000559791 -0.0000427685 0.0000027970 -0.0001044518 0.0000153664 0.0000303613 0.0000288245 -0.0000138557 -0.0000216803 0.0000046670 -0.0000068094 0.0000168247 -0.0010848768 -0.0000666409 -0.0005450402 -0.0001309898 0.0061104169 0.0091850874 0.0001155634 -0.0004709873 -0.0008825837 0.0000574309 0.0000661426 0.0000546588 -0.0012122281 -0.0003417343 0.0015298969 -0.0016547366 -0.0020685956 -0.0001135246 0.0001952980 0.0001708822 -0.0001759014 -0.0000582856 -0.0001341814 -0.0000842302 0.0144295459 0.0048787446 -0.0170821848 0.0184885352 0.0233473172 0.0013601377 -0.0026047100 -0.0009435954 0.0032099229 -0.0001467991 0.0000394541 0.0000234858 0.0069617965 0.0039639098 0.0022603318 -0.0770098685 -0.0467829874 -0.0263928323 -0.0011713460 -0.0004788246 0.0008196189 -0.0041140375 -0.0014072283 0.0057846419 0.0197877155 0.0174918158 0.0118177644 -0.0045396952 -0.0030821941 0.0009928452 0.0462042520 0.0371576022 0.0207106472 0.0373423056 0.0186168244 -0.0345447231 -0.2225990990 -0.1921062769 -0.1096883066 0.0516725543 0.0275047673 -0.0399550346 -0.5215967703 -0.4197317623 -0.2371677863 -0.4249955744 -0.2187033832 0.3748566903 0.0036690692 -0.0112528537 -0.0564982775 -0.0002004673 -0.0002379242 -0.0006846899 0.0032732260 0.0039166412 0.0107194301 0.0000025796 -0.0000093362 -0.0000066994 -0.0000363162 -0.0000037928 -0.0000207366 0.0001104407 0.0001071101 0.0000435181 -0.0000438944 -0.0000815478 -0.0000571814 0.0000479994 0.0000291880 0.0000252873 0.0000074682 -0.0000036386 -0.0000040544 -0.0000294202 0.0002348742 -0.0004225748 0.0000337415 0.0000067288 0.0000386573 -0.0000565587 -0.0000602713 0.0000459122 0.0003469360 0.0004908049 0.0000553606 -0.0000527935 0.0000536485 0.0000913498 0.0000224739 -0.0000737359 0.0000300765 -0.0002965394 -0.0000185185 -0.0002148387 0.0002278329 -0.0003981259 -0.0000062247 -0.0001320618 -0.0025365315 0.0049342267 -0.0002534102 -0.0003870593 -0.0002627353 -0.0000370086 -0.0003390260 -0.0000797080 -0.0007296125 0.0000789517 -0.0002776877 0.0001266251 0.0001447140 -0.0002046971 0.0007904352 -0.0026586817 0.0006050563 -0.0004543096 0.0005710624 -0.0013889071 -0.0044701332 -0.0032064619 -0.0002719567 0.0000035111 0.0000214600 0.0000330251 0.0001927555 -0.0001648792 -0.0004928853 0.0000129119 0.0000232103 0.0000230494 -0.0000104035 -0.0000079294 0.0000211310 0.0000477810 -0.0000258347 -0.0000695065 -0.0002203345 -0.0002471705 -0.0002469065 -0.0023613574 0.0017578884 0.0055559111 -0.0003123893 -0.0004169267 -0.0004656427 0.0001419747 0.0000178510 -0.0000544097 -0.0002570867 0.0005304788 0.0008612943 0.0023127426 0.0029536564 0.0028862464 0.0001231478 0.0000259810 0.0002488124 0.0000213526 -0.0000465601 -0.0000607221 0.0000007608 0.0000007945 0.0000015402 0.0000082959 0.0000006209 0.0000116131 -0.0000135160 0.0000226235 0.0000213396 -0.0014299653 -0.0002757429 -0.0028609527 -0.0003642507 0.0005815230 0.0006574917 0.0000044881 -0.0000007605 0.0000167664 -0.0000587633 -0.0000111059 -0.0001043590 0.0001335534 -0.0002476466 -0.0002382838 -0.0000556146 0.0000164435 0.0000536634 -0.0000552840 0.0000274163 0.0000000308 -0.0000048540 -0.0000000567 -0.0000082769 0.0000025237 0.0000009685 -0.0000067619 -0.0000304704 0.0000263664 0.0000209163 0.0000161442 0.0000140812 -0.0000078493 -0.0003050337 -0.0008486714 0.0000769078 0.0014174236 -0.0014441204 -0.0009582680 0.0022394456 0.0092033273 -0.0002188720 -0.0154589012 0.0162367541 0.0105186139 -0.0002157585 -0.0007772532 0.0000662341 0.0009562964 0.0004799610 -0.0005296457 0.0020941893 0.0093368799 -0.0004214790 -0.0108473675 -0.0043326855 0.0061189467 0.0000021830 -0.0000092715 -0.0000027875 -0.0000153988 -0.0000042341 -0.0000082760 0.0000010330 0.0002123460 -0.0000214593 0.0003618113 -0.0003503116 0.0002394659 -0.0002567687 -0.0025875706 0.0000711562 -0.0041730063 0.0035714069 -0.0027353806 -0.0000076556 0.0003978502 -0.0000230778 0.0007456399 0.0003697785 0.0003987341 -0.0003541872 -0.0041951740 -0.0000035704 -0.0081704845 -0.0042127663 -0.0043662575 0.0000099505 -0.0000216351 -0.0000223399 -0.0001417205 -0.0002464384 0.0000280879 0.0001085364 -0.0001352455 0.0001011230 -0.0002278068 0.0002102508 0.0000941830 -0.0000275856 -0.0002058600 -0.0002622886 -0.0000216631 -0.0004088278 0.0004023571 0.0015467930 0.0013484124 0.0025422372 -0.0011716138 0.0011719042 0.0007187842 0.0000467879 0.0000794510 -0.0000103380 0.0033238267 0.0121460726 0.0000345736 -0.0001851843 -0.0011649729 -0.0000672079 -0.0000875810 -0.0000965401 0.0000040077 -0.0000208020 0.0000426118 0.0000104739 -0.0000126421 0.0000298268 -0.0000124858 0.0000506448 -0.0000584642 -0.0000215963 -0.0000815756 -0.0005573988 -0.0000537758 -0.0000187339 0.0000427990 -0.0000029498 0.0001953165 0.0059091885 0.0002342561 0.0000100622 0.0000000335 0.0000030134 0.0000151188 -0.0000132315 0.0000005328 -0.0000124045 -0.0000015296 -0.0000081800 0.0000052557 -0.0000011524 0.0000013670 0.0000140454 0.0000098933 0.0000074062 0.0029774136 0.0013135504 0.0011602217 0.0000159324 -0.0007759475 -0.0011512877 -0.0000071707 0.0000683989 0.0001109425 0.0000031410 -0.0000080701 -0.0000103584 0.0000325809 0.0000034116 -0.0000519815 0.0001817273 0.0002294392 0.0000143324 0.0000181774 -0.0000014489 -0.0000303418 0.0000012342 0.0000062161 0.0000050890 -0.0004524987 -0.0001580613 0.0005507858 -0.0020254520 -0.0025596789 -0.0001481859 -0.0001782673 -0.0000732078 0.0002398414 -0.0002108678 -0.0001082902 -0.0000894762 -0.0006472942 -0.0003597921 -0.0002063718 0.0073075315 0.0043642447 0.0024235212 0.0000278238 0.0000122951 -0.0000065199 0.0000850424 0.0000256921 -0.0001321577 -0.0004407543 -0.0003876392 -0.0002571067 0.0000959324 0.0000660824 -0.0000171496 -0.0009486419 -0.0007627980 -0.0004241285 -0.0007603033 -0.0003783887 0.0007057564 0.0049590310 0.0042731835 0.0024236553 -0.0010688872 -0.0005804019 0.0008130684 0.0106954921 0.0086136310 0.0048642373 0.0086632652 0.0044584912 -0.0076491163 -0.0000733041 0.0002690420 0.0013131126 0.0000174871 0.0000222398 0.0000588973 -0.0002884029 -0.0003438044 -0.0008926457 0.0000110490 -0.0000299141 -0.0000154729 0.0000064159 -0.0000050281 -0.0000010272 -0.0000084338 -0.0000025434 0.0000023322 0.0000018453 0.0000020293 0.0000016514 -0.0000022091 -0.0000006154 -0.0000010606 -0.0000019306 -0.0000052616 -0.0000005981 0.0000084446 -0.0000093863 0.0000006336 -0.0000031234 -0.0000004388 -0.0000038632 0.0000053440 0.0000021236 -0.0000020455 -0.0000159229 -0.0000121604 -0.0000030504 -0.0000010475 -0.0000025951 -0.0000037072 0.0000033463 0.0000620293 -0.0000006151 0.0000358115 0.0000076576 0.0000193572 -0.0000905287 0.0000708962 0.0000522701 0.0000003444 0.0000333730 -0.0000489021 0.0000051155 0.0000179806 0.0000057043 0.0000005431 0.0000191687 0.0000047984 0.0000560756 -0.0000000066 0.0000227752 -0.0000052793 -0.0000141869 0.0000249911 -0.0000107928 0.0000301431 -0.0000115325 0.0000271033 -0.0000164297 0.0000561668 0.0001617049 0.0001187186 0.0000079276 -0.0000151192 -0.0000213456 0.0000086469 0.0001082471 -0.0000691607 -0.0002415973 0.0000089007 0.0000241624 0.0000349350 0.0000103372 0.0000042676 -0.0000012508 0.0000001178 -0.0000082610 -0.0000161472 0.0000108472 0.0000013868 -0.0000079305 -0.0011401005 0.0008373443 0.0027065448 -0.0002647340 -0.0002855554 -0.0003256645 -0.0000147203 -0.0000046985 0.0000013040 -0.0000641227 0.0000502318 0.0001531863 0.0000312740 0.0000329361 0.0000546625 0.0002326244 0.0000503964 0.0004680161 0.0000173745 -0.0000489820 -0.0000724598 0.0000018701 -0.0000012094 0.0000006894 0.0000039390 0.0000018393 0.0000091716 0.0000000260 -0.0000064178 -0.0000128462 -0.0026814553 -0.0005070242 -0.0053262589 -0.0004184768 0.0007054803 0.0007815428 -0.0000027860 0.0000003366 -0.0000042897 -0.0000627197 -0.0000146987 -0.0001168016 -0.0000641208 0.0001167898 0.0001194981 0.0000041171 0.0000007245 -0.0000025676 0.0000067093 0.0000011055 0.0000022993 0.0000012380 -0.0000003712 0.0000022709 0.0000013429 -0.0000002267 0.0000018416 -0.0008676822 0.0008758806 0.0005898902 0.0005118619 0.0002708255 -0.0003604168 -0.0088016947 -0.0249903019 0.0021701190 0.0397436949 -0.0403908786 -0.0268457539 0.0658395642 0.2714248183 -0.0063950491 -0.4332504017 0.4549265007 0.2947787176 -0.0062002245 -0.0225447341 0.0018040004 0.0260370147 0.0132459789 -0.0144137022 0.0606826444 0.2699864271 -0.0119855320 -0.2959807610 -0.1182816222 0.1668906505 -0.0001196499 0.0001381264 -0.0002331526 0.0006320034 0.0003173329 0.0003378333 -0.0004213018 -0.0107722300 0.0005982016 -0.0122405837 0.0123091203 -0.0081779340 0.0128748005 0.1277330014 -0.0022812652 0.1441062679 -0.1237166270 0.0945176072 0.0001588266 -0.0151208465 0.0008082189 -0.0272130595 -0.0134968456 -0.0145417904 0.0134882435 0.1592799390 0.0002192042 0.2986702364 0.1536779593 0.1596622484 0.0000030083 0.0000001898 -0.0000038900 0.0000048379 0.0000145464 -0.0000066154 0.0000015772 -0.0000105555 0.0000156599 -0.0000376333 0.0000338978 0.0000315077 -0.0000038727 0.0000132610 0.0000041694 0.0000140022 -0.0000313540 0.0000316084 -0.0000381588 -0.0000231908 -0.0000519314 0.0000758489 -0.0000798592 -0.0000565835 -0.0000210142 -0.0000451514 0.0000074055 -0.0020168928 -0.0075383810 -0.0000541096 0.0001121977 0.0007011655 0.0000403965 -0.0000166518 0.0000611561 -0.0000410090 0.0000635767 -0.0000304157 -0.0000366318 0.0000737292 0.0000293155 0.0000389976 0.0000007345 -0.0000901322 0.0000338654 -0.0001742595 -0.0011708035 -0.0001126744 -0.0000241546 0.0000842483 -0.0000131884 0.0005425803 0.0128576423 0.0005809645 -0.0000671298 -0.0000226082 -0.0000114089 -0.0000462193 0.0000236527 0.0000040212 0.0000509643 0.0000136906 0.0000143344 -0.0000229311 0.0000032461 0.0000025963 -0.0000447304 -0.0000337507 -0.0000221171 -0.0075292210 -0.0033379624 -0.0029447921 -0.0000362414 0.0013189768 0.0019869516 0.0000302695 -0.0001017228 -0.0002000631 -0.0000050169 0.0000178629 0.0000190464 -0.0002488398 -0.0000720651 0.0003121406 -0.0004746629 -0.0006022160 -0.0000439491 -0.0001068292 -0.0000192882 0.0001574647 0.0000020235 -0.0000152277 -0.0000212931 0.0029578341 0.0010102596 -0.0034962887 0.0053112010 0.0067112951 0.0003985777 0.0011365955 0.0004346667 -0.0015192730 0.0005310354 0.0002786749 0.0002348242 0.0014454321 0.0007876462 0.0004506111 -0.0162390344 -0.0096707633 -0.0053734760 -0.0000360006 -0.0000160363 -0.0000080647 -0.0000985324 0.0000004418 0.0002791914 0.0005007173 0.0004381197 0.0002837286 -0.0001079295 -0.0000789072 0.0000028950 0.0012304529 0.0009874922 0.0005448571 0.0007694457 0.0003801958 -0.0007244344 -0.0056346012 -0.0048469728 -0.0027326992 0.0011843029 0.0006659321 -0.0008624928 -0.0138155797 -0.0111299703 -0.0062926598 -0.0088356249 -0.0045462068 0.0078157006 0.0000594724 -0.0006526683 -0.0028697349 -0.0000220303 -0.0000248515 -0.0000628125 0.0003620809 0.0003907315 0.0009454765 0.0000302495 -0.0000490016 0.0000009403 -0.0000214758 0.0000209803 0.0000063263 0.0000262918 -0.0000040929 -0.0000219946 -0.0000015667 0.0000059318 0.0000043837 0.0000049221 -0.0000028934 -0.0000002637 0.0000051836 0.0000009967 -0.0000023365 -0.0000249965 0.0000307942 0.0000061223 0.0000005807 0.0000035362 0.0000020338 -0.0000177736 -0.0000039257 0.0000075415 0.0000299608 0.0000141707 -0.0000016482 -0.0000439412 0.0000264954 0.0000622520 0.0000193130 0.0000002975 0.0000000988 -0.0000585645 -0.0000207400 -0.0000256083 0.0002951853 -0.0002165013 -0.0001709815 -0.0000042534 -0.0000702973 0.0001071256 -0.0000217135 -0.0000959925 -0.0000172590 0.0000033198 -0.0000134715 -0.0000030251 -0.0000537647 -0.0000012809 -0.0000180731 0.0000060655 -0.0000163144 0.0000145329 -0.0000070578 0.0000229855 0.0000115365 -0.0000177230 0.0000141313 -0.0000375391 -0.0002785123 -0.0002066879 -0.0000087603 0.0000273226 0.0000179320 -0.0000077601 -0.0000061322 -0.0000133161 -0.0000142169 -0.0000034981 -0.0000104229 -0.0000145838 -0.0000161498 -0.0000051912 0.0000043166 0.0000051125 0.0000062000 0.0000090626 -0.0000258532 -0.0000147308 -0.0000031750 -0.0000627902 0.0000875218 0.0002002127 0.0000806965 0.0000993635 0.0001060280 0.0000274367 0.0000075850 -0.0000058735 0.0000289959 -0.0000243013 -0.0000899765 0.0001372373 0.0001453454 0.0000915486 0.0001040010 0.0000411070 0.0002334476 0.0000101950 -0.0000132271 -0.0000148900 -0.0000183025 0.0000108543 -0.0000041713 0.0000092787 -0.0000072056 -0.0000014178 -0.0000204103 0.0000122016 -0.0000107725 -0.0013455990 -0.0003000846 -0.0027068352 -0.0001383309 0.0002069801 0.0002303093 0.0000255154 -0.0000160819 0.0000047194 -0.0000279234 0.0000030402 -0.0000165685 0.0000202602 -0.0000085565 0.0000593919 -0.0000081429 -0.0000016015 0.0000064093 -0.0000114440 -0.0000024639 -0.0000029929 -0.0000083373 0.0000039061 -0.0000063838 -0.0000087818 0.0000073898 0.0000043672 0.0004618962 -0.0004155608 -0.0003163671 -0.0003103212 -0.0001794888 0.0000865691 0.0047711947 0.0134107877 -0.0011849163 -0.0214842716 0.0218619053 0.0145199897 -0.0353806873 -0.1458209211 0.0034392737 0.2341782060 -0.2460267304 -0.1593467019 0.0031286964 0.0107982930 -0.0010855835 -0.0151333603 -0.0074268576 0.0083847588 -0.0296953240 -0.1315084085 0.0060995247 0.1710884081 0.0681456816 -0.0964968302 -0.0002834772 0.0003767823 -0.0001466408 0.0011090535 0.0004664455 0.0006103788 -0.0003419955 -0.0170798022 0.0013271627 -0.0241919790 0.0237107587 -0.0160778639 0.0204923013 0.2057470280 -0.0041023717 0.2816550908 -0.2413244266 0.1847002141 0.0003798734 -0.0275712013 0.0015123057 -0.0499776456 -0.0248241773 -0.0267133350 0.0245780772 0.2904266723 0.0003876954 0.5483565402 0.2823483565 0.2931245762 -0.0000052247 -0.0000141463 0.0000106144 0.0000691065 0.0000134168 -0.0000207168 -0.0000219053 0.0000727843 -0.0000737685 0.0000097455 -0.0000155856 -0.0000219419 0.0000004628 -0.0000099078 0.0000071123 -0.0000282564 0.0000642561 -0.0000582879 0.0000195059 -0.0000093738 -0.0000032459 -0.0000011938 -0.0000059807 0.0000387740 -0.0000001263 -0.0000005532 0.0000006939 0.0000329860 0.0001454755 0.0000030996 -0.0000024102 -0.0000110239 0.0000001501 0.0000110871 -0.0000049048 -0.0000041583 -0.0000020763 0.0000049034 -0.0000010329 0.0001139598 -0.0001265180 0.0000790420 -0.0000864692 0.0000100098 -0.0000302933 -0.0002795633 -0.0023298016 -0.0000251537 0.0000596272 -0.0000499015 -0.0001914431 0.0030392006 0.0271198470 0.0015759528 0.0000100909 -0.0000064299 0.0000227585 0.0000032740 0.0000007208 0.0000101632 0.0000028718 -0.0000118275 -0.0000344464 0.0000123344 0.0000267529 0.0000435689 0.0000077244 0.0000144628 0.0000190049 0.0018675137 0.0008326055 0.0007046217 0.0000079960 -0.0003371454 -0.0005108250 -0.0000077320 0.0000255702 0.0000507733 -0.0000002414 -0.0000038031 -0.0000021268 0.0000745808 0.0000207833 -0.0000944122 0.0001144550 0.0001448079 0.0000099976 0.0000239827 0.0000041186 -0.0000349830 0.0000057036 0.0000119098 0.0000059977 -0.0008870157 -0.0002959596 0.0010490475 -0.0012848801 -0.0016213953 -0.0000968345 -0.0002534382 -0.0000951029 0.0003352037 -0.0001286806 -0.0000714146 -0.0000591439 -0.0003391345 -0.0001747651 -0.0001072949 0.0037544516 0.0022235367 0.0012462551 -0.0000005656 -0.0000001315 0.0000114963 -0.0000164962 -0.0000340481 -0.0000931999 0.0000677246 0.0000612792 0.0000470748 -0.0000535640 -0.0000282681 0.0000447434 0.0001229375 0.0000996449 0.0000574635 0.0002111283 0.0001073797 -0.0001862339 -0.0007417529 -0.0006449872 -0.0003855490 0.0006143759 0.0003108659 -0.0005578415 -0.0014785765 -0.0011851856 -0.0006582068 -0.0023426168 -0.0012048247 0.0020548049 0.0000342347 0.0002774762 0.0010613012 0.0000009994 -0.0000017840 0.0000127524 -0.0000664204 -0.0000285204 -0.0002061548 -0.0017007005 0.0025033227 0.0020727811 0.0000099280 -0.0000101154 -0.0000042986 -0.0000022152 0.0000134222 0.0000166609 -0.0000059398 -0.0000153451 -0.0000057372 0.0000080987 0.0000079632 -0.0000051729 0.0000309135 -0.0000065109 -0.0000040665 0.0000221357 -0.0000723359 -0.0000674023 0.0000014780 0.0000076285 0.0000009830 0.0000003917 -0.0000016101 -0.0000005682 0.0000179430 0.0000210914 0.0000046227 -0.0002014751 0.0001569587 0.0002250095 0.0000955300 -0.0000234486 -0.0000039026 -0.0002677708 -0.0000876718 -0.0001096682 -0.0005448503 0.0005142729 0.0002094821 -0.0001373453 -0.0003378016 0.0008014849 0.0003775253 0.0006945368 -0.0002658605 -0.0000116425 -0.0000714778 -0.0000363034 -0.0000346598 0.0000053209 -0.0000129445 -0.0000144894 -0.0000435622 0.0000799324 0.0000383316 -0.0001077077 0.0000209043 -0.0000421737 0.0000202063 -0.0000787795 -0.0001999497 -0.0001499408 -0.0000069563 -0.0000013502 0.0000003194 0.0000011978 0.0000091455 -0.0000064519 -0.0000199624 0.0000073324 0.0000088743 0.0000100539 0.0000011088 0.0000000979 -0.0000003764 -0.0000023905 0.0000018524 0.0000050894 -0.0000015429 -0.0000025363 -0.0000035589 -0.0001010130 0.0000742665 0.0002269115 -0.0000928818 -0.0001005056 -0.0001046941 -0.0000030411 -0.0000009894 -0.0000025932 0.0000236991 -0.0000208965 -0.0000598724 0.0000226343 0.0000217185 0.0000328659 -0.0376918994 -0.0078449046 -0.0762533541 -0.0037507404 0.0098643937 0.0138724904 -0.0003182785 0.0001754381 -0.0001508428 -0.0006247329 -0.0003638068 -0.0016776300 0.0002717559 -0.0000285013 0.0003679374 0.4330137385 0.0816059397 0.8662551625 0.0788877608 -0.1342900846 -0.1491600346 0.0000127405 0.0001038534 0.0002474373 0.0100190784 0.0023262762 0.0189137707 -0.0004972922 -0.0003359273 -0.0008880702 0.0000004298 0.0000003720 0.0000010498 0.0000022393 0.0000002870 0.0000015084 -0.0000133990 -0.0000139815 -0.0000419832 -0.0000943632 -0.0000156304 -0.0001625024 -0.0000025896 0.0000049530 0.0000014549 0.0000038812 0.0000000857 -0.0000016345 -0.0000404563 -0.0001153056 0.0000098590 0.0001729384 -0.0001741114 -0.0001165786 0.0003038909 0.0012594525 -0.0000304598 -0.0018812094 0.0019750000 0.0012785084 -0.0000344073 -0.0001270062 0.0000100091 0.0001091293 0.0000570530 -0.0000601808 0.0003448505 0.0014962060 -0.0000853474 -0.0012490569 -0.0005003657 0.0007033399 0.0000420833 0.0000421969 0.0000161857 0.0000093289 0.0000362389 0.0000192909 -0.0000136737 -0.0000175889 -0.0000106963 -0.0000739209 0.0001093432 -0.0000506499 0.0000343647 0.0003010364 -0.0000033729 0.0010077740 -0.0008651859 0.0006593810 -0.0000382698 -0.0003020747 -0.0000016454 -0.0003070134 -0.0001687291 -0.0001642721 0.0003778786 0.0032299529 0.0000646307 0.0034399874 0.0017468989 0.0018335732 0.0000047877 0.0000064488 -0.0000056376 -0.0000712175 -0.0000437339 0.0000211107 0.0000193441 -0.0000305743 0.0000367833 -0.0000112825 0.0000199737 0.0000141250 -0.0000008276 0.0000210648 0.0000001606 0.0000516107 -0.0001441847 0.0001728249 -0.0000797987 -0.0000539146 -0.0001415839 0.0000376936 -0.0000384954 -0.0000419084 -0.0000070872 0.0000070679 0.0000051600 0.0001509646 0.0007366976 0.0000419533 -0.0000087119 -0.0000648809 -0.0000049854 -0.0000070684 0.0000040503 0.0000050088 0.0000407084 -0.0000407968 -0.0000191099 0.0000482029 0.0000176592 0.0000291050 -0.0000100317 0.0000017046 -0.0000065639 0.0000080005 0.0000440237 0.0000046275 -0.0000111703 -0.0000051961 -0.0000057784 -0.0000581130 -0.0005378689 -0.0000429229 -0.0000795425 -0.0000508782 -0.0000134512 -0.0000638391 0.0000242199 -0.0000335295 0.0000945392 0.0001119589 0.0000943755 0.0000033984 -0.0000679086 -0.0000459268 -0.0001132087 -0.0001406560 -0.0001095323 -0.0209013776 -0.0110318072 -0.0089937718 -0.0038012486 -0.0285741982 -0.0354307409 0.0035102543 0.0050090471 0.0014631812 0.0013618810 0.0017934704 0.0001283681 -0.0362322031 -0.0125064580 0.0425835362 -0.0316688181 -0.0414072896 -0.0045908689 -0.0237959950 -0.0074639264 0.0332702062 -0.0003893776 -0.0018531570 -0.0020841600 0.4112990517 0.1411099227 -0.4844472321 0.3602734238 0.4565643643 0.0296926872 0.2709000040 0.0990692025 -0.3578482406 0.0016619509 0.0005835327 0.0006275417 -0.0086925407 -0.0050213460 -0.0028718381 0.0978917416 0.0596823643 0.0325930969 0.0001334109 0.0000982808 0.0001909998 0.0000762799 -0.0000576932 -0.0004543992 -0.0007205705 -0.0006166504 -0.0003610826 -0.0002581680 -0.0001022454 0.0003443419 -0.0010447742 -0.0008373210 -0.0004731179 -0.0003432800 -0.0001594912 0.0003696878 0.0082981999 0.0071253843 0.0037538026 0.0027114138 0.0015493789 -0.0024170604 0.0116948987 0.0094329410 0.0053674245 0.0042099070 0.0021553411 -0.0038189306 0.0000201641 0.0011653326 0.0048061232 0.0004646513 0.0006512524 0.0013806402 -0.0045262169 -0.0055597202 -0.0189309298 -0.0000036288 0.0000102028 0.0000045626 -0.0000484215 0.0000947258 0.0000312302 0.0000504131 -0.0000807443 -0.0001592924 0.0000376558 0.0000843724 0.0000767149 -0.0000180977 -0.0000270112 -0.0000077501 -0.0000277990 0.0000053962 0.0000037755 0.0000721898 -0.0000596169 -0.0000537058 -0.0000067082 -0.0000005535 -0.0000020930 -0.0000183348 -0.0000074655 0.0000106086 0.0000625380 -0.0000199256 -0.0000040633 0.0001503286 -0.0001092488 -0.0001572645 -0.0000075400 0.0001063240 -0.0000180850 0.0002594175 0.0000270759 0.0001397692 -0.0008807663 0.0006375788 0.0005040470 -0.0000102357 -0.0000410898 0.0001804965 0.0000940381 0.0002270865 0.0000224630 0.0000016958 0.0001209845 0.0000453964 0.0001482867 -0.0000236902 0.0000414852 -0.0000084150 -0.0000064099 -0.0000171028 -0.0001259490 0.0003948709 -0.0000265594 -0.0001124368 0.0000290412 -0.0000734141 -0.0003727288 -0.0002676983 0.0000171129 0.0000129507 0.0000035036 0.0000062448 0.0002213828 -0.0001182005 -0.0004373665 -0.0002988499 -0.0002910206 -0.0002975007 -0.0000106239 0.0000020927 0.0000055870 -0.0000063725 0.0000088526 0.0000211571 0.0000047371 0.0000147906 0.0000173044 -0.0021783343 0.0015322441 0.0050931704 0.0025181625 0.0030529817 0.0030162769 0.0000199015 0.0000144416 0.0000357226 0.0000641703 -0.0000224191 -0.0001074971 -0.0000885725 -0.0001242798 -0.0000683932 -0.0000687912 -0.0000173179 -0.0001443723 -0.0000104646 0.0000201272 0.0000242645 0.0000055303 -0.0000032861 0.0000009301 -0.0000035518 0.0000033381 0.0000024157 0.0000244392 -0.0000401548 -0.0000390399 0.0008223087 0.0001652297 0.0016491346 0.0001494857 -0.0002632177 -0.0002956942 -0.0000176077 0.0000088174 -0.0000004777 -0.0000253414 0.0000054643 -0.0000233015 -0.0002418560 0.0004731218 0.0004532700 -0.0000013843 0.0000030532 -0.0000284383 -0.0000364520 -0.0000570564 0.0001357196 0.0000060452 -0.0000018210 0.0000031996 0.0000072913 -0.0000038784 -0.0000035353 -0.0000036176 0.0000067450 0.0000029408 0.0000086529 -0.0000003430 -0.0000042810 -0.0000403946 -0.0001219836 0.0000081386 0.0001658537 -0.0001663110 -0.0001124409 0.0003200515 0.0013157844 -0.0000221610 -0.0018105878 0.0018998262 0.0012358525 -0.0000443488 -0.0001776720 0.0000123086 0.0000914324 0.0000531897 -0.0000503532 0.0004713719 0.0020913260 -0.0001049199 -0.0010685786 -0.0004320834 0.0006043565 0.0000091968 -0.0000019845 0.0000047249 -0.0000070740 -0.0000053932 -0.0000039628 0.0000138166 0.0002036070 -0.0000108453 0.0001004371 -0.0001093499 0.0000676275 -0.0002314476 -0.0023773479 0.0000740157 -0.0012315672 0.0010650884 -0.0008086406 0.0000006748 0.0001782008 -0.0000079731 0.0002713959 0.0001311856 0.0001452964 -0.0001645447 -0.0018936072 -0.0000043096 -0.0029877977 -0.0015337452 -0.0015984277 -0.0000085911 -0.0001123507 0.0000658970 0.0011346069 0.0007560347 -0.0004458666 -0.0003747788 0.0007421357 -0.0006283583 -0.0004700846 0.0002088274 0.0003848790 -0.0000165116 -0.0000843707 -0.0001453713 0.0001379386 0.0000902426 -0.0000156787 0.0006644635 0.0008453509 0.0013206811 -0.0005784195 0.0005047008 0.0001363354 -0.0000014259 0.0000045408 0.0000001871 0.0000522476 0.0002574536 0.0000130917 -0.0000013942 -0.0000223639 -0.0000032494 -0.0000052480 0.0000010868 0.0000035924 0.0000297798 -0.0000255763 -0.0000117942 0.0000313575 0.0000098272 0.0000200346 -0.0000069666 0.0000001276 -0.0000040725 0.0000050208 0.0000267426 0.0000033543 -0.0000083308 -0.0000033181 -0.0000045126 -0.0000330733 -0.0003288334 -0.0000267339 -0.0000541623 -0.0000379729 -0.0000130959 -0.0000387731 0.0000078039 -0.0000245215 0.0000313841 0.0001021434 0.0000966034 -0.0000203101 -0.0000740371 -0.0000293708 -0.0001209054 -0.0001200650 -0.0000683710 -0.0163225922 -0.0080167927 -0.0069901057 -0.0000177937 -0.0015433502 -0.0022369456 0.0000226469 0.0001596144 0.0001945427 -0.0000564967 -0.0000676815 -0.0000450876 -0.0001832344 -0.0001064761 0.0001565708 0.0000430907 0.0000562018 0.0000100454 -0.0000018539 -0.0000183750 -0.0000104037 0.0000512707 0.0000678751 -0.0000048712 0.0017099424 0.0006300409 -0.0019570588 -0.0004909870 -0.0006255260 -0.0000128557 0.0000545028 -0.0000314790 -0.0000240610 0.0013390799 0.0006447251 0.0006092033 -0.0017167114 -0.0010032015 -0.0007258700 0.0179121082 0.0113543718 0.0069212314 0.0009910159 0.0004004633 -0.0007991901 0.0009329584 0.0120205592 0.0476003219 -0.0154322998 -0.0138243087 -0.0099548115 -0.0048400893 -0.0030737103 0.0019359914 0.0379653118 0.0298798676 0.0145087043 -0.0376444401 -0.0195516425 0.0314891180 0.1731814480 0.1495899763 0.0863446722 0.0571491066 0.0302597271 -0.0452781064 -0.4097860790 -0.3290740250 -0.1835166025 0.4061762793 0.2098131504 -0.3545871907 -0.0094883622 -0.1287756253 -0.5128605921 0.0002195641 0.0002681905 0.0007646508 -0.0034399826 -0.0042511863 -0.0119668621 -0.0000014822 0.0000063002 0.0000058677 0.0000422633 -0.0000101570 -0.0000169018 -0.0001373457 -0.0000305417 0.0000429867 0.0000175379 -0.0000336287 0.0000063389 0.0000103551 0.0000394741 0.0000186643 0.0000032903 -0.0000075538 -0.0000031784 0.0000393533 0.0001537643 -0.0003969004 0.0000079918 -0.0000052494 -0.0000019995 0.0000550321 0.0000436124 -0.0000465415 -0.0001402397 -0.0002110255 0.0000493883 0.0000178042 0.0000379734 -0.0000355731 0.0000017863 -0.0000857527 0.0000390978 -0.0001088433 0.0000089519 -0.0000751196 -0.0003089049 0.0002074543 0.0002130956 -0.0001788108 -0.0019404585 0.0044541848 -0.0002437586 -0.0005499154 -0.0001754121 0.0000192692 -0.0000760809 -0.0000265284 -0.0001454445 0.0000178137 -0.0000564499 0.0000328353 0.0000230030 -0.0000072108 -0.0002420494 0.0009684505 -0.0002395108 -0.0004021303 -0.0001667271 -0.0000951449 0.0021228844 0.0014784037 0.0001711278 -0.0000137288 -0.0000055067 0.0000222714 -0.0000450010 0.0000397356 0.0001105526 -0.0000049148 -0.0000193907 -0.0000212782 -0.0000087543 -0.0000160318 -0.0000425584 -0.0003760308 0.0003023007 0.0008276597 -0.0002538172 -0.0003330526 -0.0003879113 0.0005459151 -0.0004336665 -0.0013152303 0.0001426555 0.0001598961 0.0002079869 -0.0000758080 -0.0000163264 0.0000776371 0.0045059331 -0.0033327743 -0.0091743304 0.0034277238 0.0041007458 0.0041840676 -0.0000586895 -0.0000139641 -0.0001200826 -0.0000076460 0.0000160918 0.0000206948 0.0000029049 -0.0000013167 0.0000001834 -0.0000011777 0.0000034099 0.0000056800 0.0000252193 -0.0000440474 -0.0000450890 0.0006873886 0.0001414958 0.0013599805 0.0001184155 -0.0002095769 -0.0002355968 -0.0000087703 0.0000074628 0.0000088415 -0.0000249144 0.0000020712 -0.0000590068 -0.0002615730 0.0005033874 0.0005084165 0.0000309913 -0.0000117758 -0.0000566196 0.0000218428 -0.0000179413 -0.0000215759 0.0000014296 -0.0000021582 -0.0000022398 0.0000055634 -0.0000031427 -0.0000058337 -0.0000016327 0.0000028714 0.0000016683 0.0000065037 -0.0000007547 -0.0000039079 -0.0000124291 -0.0000423124 0.0000019437 0.0000397356 -0.0000374894 -0.0000267937 0.0001085922 0.0004609022 -0.0000094866 -0.0004348282 0.0004498725 0.0002953599 -0.0000281185 -0.0001266524 0.0000067699 -0.0000016679 0.0000078354 0.0000015806 0.0003240534 0.0014547880 -0.0000665531 -0.0000258876 -0.0000183512 0.0000141543 0.0000051519 -0.0000003896 0.0000025857 -0.0000032546 -0.0000031628 -0.0000018045 0.0000054025 0.0000904018 -0.0000053173 0.0000512988 -0.0000546467 0.0000344677 -0.0001027505 -0.0010676120 0.0000295387 -0.0006268983 0.0005370961 -0.0004099881 0.0000011693 0.0000922683 -0.0000035236 0.0001250365 0.0000603242 0.0000669929 -0.0000844469 -0.0009886726 -0.0000019746 -0.0013781956 -0.0007096985 -0.0007361774 -0.0000173825 -0.0000175373 0.0000018465 0.0002735008 0.0002582473 -0.0000992916 0.0000597446 -0.0000467002 0.0001601041 -0.0000378694 0.0000706587 0.0000608299 -0.0001992846 -0.0000514781 -0.0003354361 0.0003131112 -0.0011404093 0.0012486473 0.0018967976 0.0020077857 0.0033043708 0.0002632891 -0.0003942254 -0.0003358882 0.0000045464 -0.0000121621 -0.0000070864 -0.0001777077 -0.0008100747 -0.0000151208 0.0000108233 0.0000732771 0.0000066073 0.0000117014 -0.0000032403 -0.0000069629 -0.0000572560 0.0000520486 0.0000260394 -0.0000582177 -0.0000210115 -0.0000356025 0.0000124191 -0.0000003847 0.0000069236 -0.0000075977 -0.0000372720 -0.0000044070 0.0000131743 0.0000065537 0.0000067608 0.0000545925 0.0004641298 0.0000414293 0.0001051749 0.0000630674 0.0000129995 0.0000799196 -0.0000327341 0.0000345741 -0.0001192890 -0.0001323877 -0.0001147979 0.0000051157 0.0000749797 0.0000494776 0.0001485405 0.0001671279 0.0001105367 0.0364360152 0.0174125471 0.0148976418 -0.0007733958 -0.2805731791 -0.4093760519 0.0005139447 0.0265015463 0.0380265340 -0.0005144461 -0.0010533021 -0.0003856436 -0.0367433070 -0.0139766668 0.0412154340 0.0294256623 0.0364058243 0.0013754321 0.0149518408 0.0042806812 -0.0214894791 -0.0008836012 -0.0021917890 -0.0019213848 0.4008001898 0.1390329977 -0.4697750238 -0.3166301404 -0.3989492342 -0.0230551138 -0.1682702453 -0.0607367844 0.2232884938 -0.0028744305 -0.0011705534 -0.0009809749 0.0020854308 0.0011130709 0.0006782326 -0.0213303050 -0.0136216463 -0.0073754280 -0.0000777814 -0.0000398144 -0.0000510103 -0.0000164077 -0.0000329230 -0.0000909156 0.0001391715 0.0001229704 0.0000825349 0.0005198109 0.0002710218 -0.0004572262 0.0001074161 0.0000967123 0.0000929388 0.0001119614 0.0000564759 -0.0001058587 -0.0016550886 -0.0014630147 -0.0007581042 -0.0055835519 -0.0031188539 0.0047310149 -0.0013417951 -0.0011115413 -0.0006910363 -0.0013014143 -0.0006748618 0.0011564030 0.0000235831 0.0002704386 0.0010824643 -0.0000391489 -0.0000143276 -0.0006269088 0.0044194461 0.0057250736 0.0124859070 -0.0000018314 -0.0000066606 -0.0000066614 0.0000063488 -0.0000280454 -0.0000035633 0.0000012227 0.0000260683 0.0000332028 -0.0000117759 -0.0000172416 -0.0000179745 0.0000088894 0.0000022743 0.0000039404 0.0000033377 0.0000024578 -0.0000002922 -0.0000577394 0.0000450069 0.0000497885 0.0000024402 -0.0000003175 0.0000042083 -0.0000052148 -0.0000014090 -0.0000011050 0.0000063732 0.0000044563 0.0000063095 0.0000059219 0.0000052505 0.0000230878 0.0000104083 -0.0000237341 0.0000026842 -0.0000935379 -0.0000159743 -0.0000446221 0.0006969212 -0.0005246212 -0.0004002341 0.0000067414 0.0000551025 -0.0002324375 -0.0000386634 -0.0000935706 0.0000000026 0.0000062863 -0.0000181137 -0.0000077912 -0.0000929435 0.0000050130 -0.0000282739 0.0000112120 0.0000123184 -0.0000314871 0.0000026700 0.0000138952 -0.0000082570 -0.0000078393 -0.0000071668 -0.0000458835 -0.0000600903 -0.0000533932 -0.0000020242 -0.0000017343 0.0000096922 0.0000048715 0.0000643839 -0.0000842603 -0.0002028857 0.0002967262 0.0003167926 0.0003423459 0.0000171368 -0.0000011688 -0.0000112284 0.0000172445 -0.0000146144 -0.0000405658 -0.0000058826 -0.0000122832 -0.0000105862 -0.0010571852 0.0008312638 0.0023803204 -0.0031496837 -0.0034337405 -0.0036943678 -0.0000305881 -0.0000150231 -0.0000531252 -0.0001848541 0.0001218442 0.0003577853 0.0000698390 0.0001002116 0.0000480483 0.0000190448 0.0000059751 0.0000410573 0.0000098001 -0.0000146221 -0.0000145935 -0.0000052630 0.0000028105 -0.0000016139 0.0000071698 -0.0000075034 -0.0000065083 -0.0000707665 0.0001243365 0.0001292953 -0.0002484495 -0.0000589047 -0.0004911036 -0.0001002940 0.0001619462 0.0001848740 0.0000129491 -0.0000071401 0.0000070729 0.0000465633 0.0000104622 0.0001057745 0.0007588756 -0.0014144257 -0.0014480749 -0.0000000465 -0.0000004673 0.0000335455 0.0000392295 0.0000325758 -0.0000655742 -0.0000054764 0.0000019074 -0.0000055613 -0.0000038897 0.0000029717 -0.0000002030 0.0000028534 -0.0000082012 -0.0000040972 -0.0000105309 0.0000021576 0.0000068192 0.0000402444 0.0001387145 -0.0000078085 -0.0001173600 0.0001117077 0.0000776511 -0.0003541189 -0.0015149363 0.0000421361 0.0012742239 -0.0013186004 -0.0008584204 0.0000494184 0.0002150151 -0.0000123728 -0.0000201319 -0.0000252546 0.0000098401 -0.0005603037 -0.0024986269 0.0001096878 0.0003061765 0.0001340616 -0.0001680722 -0.0000068287 -0.0000010282 -0.0000025843 0.0000033676 0.0000033424 0.0000021501 -0.0000039624 -0.0000765824 0.0000047938 -0.0000387854 0.0000408053 -0.0000261338 0.0000869480 0.0009194489 -0.0000147611 0.0004776732 -0.0004100460 0.0003146027 -0.0000018531 -0.0000722217 0.0000020943 -0.0000859331 -0.0000413764 -0.0000459696 0.0000673197 0.0007675359 0.0000041956 0.0009557179 0.0004897108 0.0005132944 -0.0000130851 0.0000459051 0.0000108940 -0.0003891004 -0.0002097617 0.0001412130 -0.0001310518 0.0001238058 -0.0000182484 0.0006466372 -0.0005858477 -0.0003358880 0.0000614938 -0.0000009617 0.0001089808 -0.0001593126 0.0003937940 -0.0003990160 -0.0004813639 -0.0006626823 -0.0010374750 -0.0000363889 0.0001754725 0.0002109330 0.0000208094 -0.0001020073 -0.0000471394 0.0012665587 0.0041959923 0.0000096039 -0.0001727841 -0.0003005502 0.0000545543 0.0002118806 0.0003854110 -0.0000612452 0.0000538299 0.0000438117 -0.0000247985 0.0000313791 -0.0000353198 0.0000268439 -0.0000903941 0.0001178392 0.0000688679 -0.0000075345 -0.0000919134 -0.0000043751 0.0000034435 0.0000060396 -0.0000161522 0.0000395221 0.0012388802 0.0000661985 -0.0000390150 -0.0000270976 0.0000093487 0.0000860581 -0.0000748750 0.0000029173 -0.0000152386 0.0000280634 -0.0000443585 0.0000023833 -0.0000142246 0.0000103727 0.0000203751 0.0000009956 0.0000232095 0.0044877940 0.0020796584 0.0017138148 0.0000011054 0.0005442372 0.0007840840 0.0000022383 -0.0000479498 -0.0000737130 0.0000135270 0.0000069457 -0.0000021871 0.0000477553 0.0000194482 -0.0000511747 -0.0000702402 -0.0000881143 -0.0000042897 -0.0000479692 -0.0000133126 0.0000726903 -0.0000012517 0.0000025610 0.0000044147 -0.0004927210 -0.0001672088 0.0005723233 0.0007637859 0.0009694293 0.0000540346 0.0005448745 0.0001991091 -0.0007528192 -0.0003301720 -0.0001698342 -0.0001365773 -0.0002385309 -0.0000993264 -0.0000659210 0.0026194928 0.0014849606 0.0008397919 -0.0000042405 -0.0000066113 0.0000015146 0.0000000991 0.0000156492 0.0000694857 -0.0000040499 -0.0000041278 -0.0000017765 0.0000963530 0.0000489894 -0.0000838410 0.0000708360 0.0000570474 0.0000358303 -0.0000357177 -0.0000192298 0.0000262420 0.0000182097 0.0000235977 0.0000093223 -0.0010479880 -0.0005417652 0.0008838732 -0.0007798130 -0.0006199823 -0.0003574622 0.0003591350 0.0001894688 -0.0003187053 -0.0000158282 -0.0001825058 -0.0007352093 -0.0000253409 -0.0000325505 -0.0000757016 0.0003558924 0.0004802536 0.0011967023 0.0000171444 -0.0000096168 0.0000231452 0.0000184997 -0.0000198250 -0.0000076321 -0.0000151558 0.0000129832 0.0000282560 -0.0000046050 -0.0000157242 -0.0000101156 0.0000025141 0.0000070675 0.0000000944 0.0000060066 0.0000030051 0.0000007454 0.0000029850 -0.0000008062 -0.0000069499 0.0000027047 0.0000035226 -0.0000000518 0.0000090967 0.0000009717 -0.0000040224 -0.0000020712 0.0000117764 0.0000051294 -0.0000243862 0.0000346964 0.0000286840 -0.0000015728 -0.0000912410 0.0000047875 -0.0000589917 -0.0000064613 -0.0000284098 -0.0000409148 0.0000572506 0.0000230803 -0.0000012228 -0.0000088578 0.0000676614 -0.0000077076 -0.0000559804 -0.0000083293 -0.0000093836 -0.0000612310 -0.0000170386 -0.0000308023 0.0000019192 -0.0000102149 -0.0000043829 -0.0000092765 0.0000280575 0.0000385430 -0.0001163029 0.0000125990 -0.0000201876 0.0000080165 -0.0000487994 -0.0000220788 -0.0000162322 -0.0000074012 -0.0000360142 -0.0000208611 0.0000131790 0.0000086969 0.0000179609 0.0000211800 0.0000021873 0.0000120092 0.0000182226 0.0000224616 0.0000071227 -0.0000063730 0.0000084349 -0.0000178858 -0.0000363106 0.0000036760 -0.0000125506 -0.0000241338 0.0000857545 -0.0001073252 -0.0003215274 -0.0000991139 -0.0001216035 -0.0001423284 -0.0000300955 -0.0000067301 0.0000068779 -0.0001667535 0.0001431560 0.0003795355 0.0001407164 0.0002107855 0.0002265325 -0.0000100199 0.0000060505 -0.0000051763 -0.0000029337 0.0000092459 0.0000122466 -0.0000051736 0.0000007609 -0.0000053171 0.0000615145 0.0000256380 0.0001410623 0.0001468254 -0.0002790697 -0.0003118928 0.0000500850 -0.0000015670 0.0000650207 0.0000617891 -0.0000989740 -0.0001102863 0.0000117573 -0.0000047845 0.0000033036 -0.0008619161 -0.0001864180 -0.0016417158 -0.0017470531 0.0032357221 0.0034560857 0.0000092488 0.0000006732 -0.0000078046 0.0000116349 0.0000032963 0.0000033426 -0.0000029741 0.0000003350 -0.0000032053 -0.0000050232 0.0000024382 0.0000019660 -0.0002455408 -0.0002900851 0.0000494615 -0.0023932126 -0.0006708959 0.0015219019 -0.0018508787 -0.0051292281 0.0004796312 0.0076700727 -0.0097053868 -0.0053551808 0.0132831504 0.0540562204 -0.0014118487 -0.0874686284 0.0942806062 0.0597842080 0.0151902111 0.0783162703 -0.0025228777 0.0284928632 0.0074147934 -0.0163614778 -0.1910112691 -0.8772750191 0.0354641985 -0.2926579559 -0.1102706147 0.1652923883 0.0002588490 -0.0000768108 0.0006269504 -0.0000142725 -0.0001861939 -0.0000003827 0.0020757270 0.0155392899 0.0001564375 -0.0049644783 0.0031483660 -0.0031085334 -0.0186418365 -0.1735096473 0.0023285977 0.0477887838 -0.0395447855 0.0310932567 0.0001014668 -0.0010594971 0.0000967708 -0.0020753982 -0.0012353919 -0.0011016538 0.0008942420 0.0109549994 -0.0000229755 0.0223891705 0.0119109489 0.0119154984 0.0000044464 0.0000051995 -0.0000087554 -0.0000588979 -0.0000287480 0.0000174000 0.0000277689 -0.0000503559 0.0000474275 -0.0000389188 0.0000527137 0.0000286451 0.0000202337 -0.0000236900 -0.0000223938 0.0000218609 -0.0000605392 0.0000502539 0.0000401606 0.0000433902 0.0000588811 -0.0003116480 0.0003559652 0.0001406028 -0.0000008444 -0.0000009573 0.0000006114 -0.0000000687 0.0000017756 0.0000036817 -0.0000013050 0.0000018306 0.0000014101 0.0000026770 -0.0000019864 0.0000054340 0.0000092190 -0.0000109361 -0.0000031515 0.0002588497 0.0000191074 0.0001298215 -0.0000561201 -0.0000089299 -0.0000057274 0.0001176949 -0.0001531985 0.0000166582 0.0000319659 0.0000172838 0.0002906641 -0.0001003756 0.0008126272 0.0001211941 -0.0000064901 0.0002104043 -0.0002999447 0.0000126310 0.0000290271 -0.0000278865 -0.0000970221 -0.0000621928 0.0000407788 0.0000228881 -0.0000092779 -0.0000169976 0.0000591071 0.0000661612 0.0000236195 0.0109288537 0.0049454727 0.0042290029 0.0000054190 0.0006534307 0.0009580981 -0.0000013040 -0.0000608638 -0.0000869156 0.0000289885 0.0000133500 -0.0000022517 0.0000859287 0.0000391057 -0.0000901984 -0.0000696262 -0.0000873579 -0.0000064663 -0.0000643135 -0.0000131980 0.0001002885 -0.0000099201 -0.0000050911 0.0000124391 -0.0008816607 -0.0003165910 0.0010428302 0.0007690131 0.0009728266 0.0000683804 0.0007531172 0.0002554109 -0.0009844223 -0.0008164564 -0.0003999389 -0.0003346368 -0.0004666769 -0.0002084350 -0.0001255356 0.0053154559 0.0029843126 0.0016808834 -0.0000056596 -0.0000072782 0.0000045487 0.0000001734 0.0000085800 0.0000372656 -0.0000215630 -0.0000167016 -0.0000073888 0.0001490907 0.0000780814 -0.0001247735 0.0000651283 0.0000548516 0.0000391237 -0.0000293862 -0.0000149785 0.0000212525 0.0001976302 0.0001641340 0.0000950993 -0.0015977491 -0.0008700882 0.0013498404 -0.0007448253 -0.0005911033 -0.0003525120 0.0002959639 0.0001558500 -0.0002657760 -0.0000065289 -0.0000919913 -0.0003917822 -0.0000770950 -0.0000885826 -0.0002398857 0.0011213527 0.0012659414 0.0037703539 -0.0015964900 -0.0001689241 -0.0030929886 0.0000330915 -0.0000385558 -0.0000138450 -0.0000220877 0.0000296690 0.0000534939 -0.0000112918 -0.0000320367 -0.0000207966 0.0000096886 0.0000138192 -0.0000029111 0.0000082614 0.0000129433 0.0000111883 0.0000005559 -0.0000044784 -0.0000049125 0.0000040651 0.0000003308 0.0000058605 0.0000135752 0.0000012554 -0.0000075493 0.0000007417 0.0000123794 0.0000119982 0.0001813992 0.0000378172 0.0000109857 0.0000461785 -0.0001922411 -0.0000132592 -0.0003283096 -0.0000625393 -0.0000985167 -0.0000417895 0.0001168958 -0.0000095842 -0.0000046221 -0.0000111543 0.0001010697 -0.0000113392 -0.0000679030 -0.0000431353 0.0000017392 -0.0000585111 -0.0000296330 -0.0000950657 0.0000080744 -0.0000372479 -0.0000036529 0.0000134578 -0.0000002598 0.0000441527 -0.0001052026 0.0000062217 -0.0000464285 0.0000147046 -0.0001082516 -0.0000307645 -0.0000286510 -0.0000090228 0.0000015142 0.0000006235 -0.0000039989 0.0000029733 -0.0000045360 -0.0000105956 0.0000118838 0.0000128581 0.0000120487 -0.0000000539 0.0000009201 0.0000012948 0.0000118673 -0.0000146037 -0.0000353530 0.0000642557 0.0000729177 0.0000756713 -0.0000464939 0.0000417542 0.0001288465 -0.0001264551 -0.0001410986 -0.0001378428 0.0000025211 0.0000011329 0.0000034598 -0.0001895778 0.0001526616 0.0004201915 -0.0007414562 -0.0008424869 -0.0008496765 0.0009195577 -0.0001270890 0.0010922075 -0.0007684468 0.0015472978 0.0019722332 -0.0005700631 0.0007796129 0.0005370067 -0.0135456031 -0.0056752161 -0.0307225754 -0.0272654286 0.0506069267 0.0556476175 -0.0077296375 -0.0010387313 -0.0142095499 0.0111049086 -0.0185029478 -0.0204934075 -0.0000855210 -0.0001347317 -0.0005044617 0.1875904554 0.0411324405 0.3541498720 0.3189204875 -0.5837477567 -0.6214718758 -0.0000000654 -0.0000000385 -0.0000012976 -0.0000019297 -0.0000004491 -0.0000015387 -0.0000987515 0.0001738348 0.0002480985 0.0000260590 0.0000013479 0.0000565310 -0.0000003884 -0.0000000990 0.0000001435 -0.0000105895 -0.0000051577 0.0000055445 -0.0000086483 -0.0000226232 0.0000028571 0.0000371320 -0.0000474464 -0.0000255312 0.0000572235 0.0002331666 -0.0000017162 -0.0004281614 0.0004599736 0.0002965056 0.0000789092 0.0004095895 -0.0000115133 0.0001518988 0.0000390071 -0.0000863691 -0.0009989588 -0.0045984451 0.0001827671 -0.0015683047 -0.0005917113 0.0008856885 0.0000047769 0.0000027937 0.0000052357 -0.0000109353 0.0000282794 -0.0000147233 0.0000089627 0.0000839712 -0.0000035375 -0.0000179117 0.0000095623 -0.0000108818 -0.0000996882 -0.0009805114 0.0000127210 0.0001586726 -0.0001379336 0.0001133701 0.0000075996 -0.0000241132 0.0000052259 -0.0000330277 -0.0000113158 -0.0000174515 0.0000048489 0.0001998806 -0.0000021656 0.0003449464 0.0001722387 0.0001871482 0.0000042739 0.0000068836 -0.0000058956 -0.0000729834 -0.0000375022 0.0000155879 0.0000010743 -0.0000203372 0.0000190240 -0.0000188329 0.0000279163 0.0000253528 0.0000064557 0.0000341069 0.0000012183 0.0001040363 -0.0001973138 0.0003188727 -0.0001653800 -0.0001019904 -0.0003484186 -0.0000257081 0.0000031610 -0.0000014872 -0.0000108071 0.0000481139 0.0000024987 -0.0000706433 -0.0001252370 0.0000234754 0.0000426262 0.0000013629 -0.0000248832 0.0001261253 -0.0000818522 0.0001223467 -0.0000781605 -0.0000477718 0.0000499608 -0.0000608878 0.0000798085 -0.0000328117 -0.0000372252 0.0004638206 -0.0001030023 0.0000949798 -0.0002303463 0.0000517755 -0.0000581621 -0.0001040223 -0.0000506339 0.0000017460 0.0030860858 0.0001164970 -0.0000966933 -0.0000430090 -0.0000079493 -0.0000009133 -0.0000205599 0.0000018795 0.0000358620 0.0000451196 -0.0000037593 -0.0000110768 -0.0000181359 0.0000010412 -0.0000295895 -0.0000412305 -0.0000159632 -0.0059406738 -0.0026777409 -0.0022929048 -0.0000011545 -0.0002674000 -0.0003599568 -0.0000034992 0.0000193713 0.0000368929 -0.0000191543 -0.0000092908 0.0000042246 0.0000035116 -0.0000055265 -0.0000094603 0.0000694581 0.0000877821 0.0000092782 0.0000654694 0.0000161852 -0.0000943559 0.0000093877 0.0000091987 -0.0000027986 -0.0000887182 -0.0000331922 0.0001116405 -0.0007820714 -0.0010004274 -0.0000495030 -0.0007483276 -0.0002657020 0.0009942175 0.0004499245 0.0002128750 0.0001791076 0.0002070381 0.0000977858 0.0000556403 -0.0024444234 -0.0013663934 -0.0007452039 0.0000010437 0.0000013596 -0.0000014268 -0.0000002439 -0.0000145321 -0.0000604806 0.0000044916 0.0000033002 0.0000025941 -0.0000353744 -0.0000186769 0.0000293445 -0.0000452084 -0.0000360402 -0.0000202998 0.0000285678 0.0000154438 -0.0000204296 -0.0000281995 -0.0000155093 -0.0000070239 0.0003545581 0.0002285731 -0.0002924695 0.0005003085 0.0004134324 0.0002192170 -0.0002922133 -0.0001398619 0.0002624212 0.0000103839 0.0001824366 0.0006633208 0.0000409697 0.0000458458 0.0001356478 -0.0006299006 -0.0007279147 -0.0021399418 0.0000256117 -0.0000273355 0.0000086053 -0.0000116557 0.0000130619 0.0000037680 0.0000140020 -0.0000031553 -0.0000145471 0.0000001478 0.0000029463 0.0000045759 0.0000021163 -0.0000000004 -0.0000016639 0.0000009296 0.0000135765 0.0000074248 -0.0000059304 -0.0000010880 0.0000078209 0.0000056098 -0.0000031551 0.0000101953 -0.0000089192 -0.0000025827 0.0000034430 0.0000105360 0.0000028188 -0.0000032023 0.0000613671 -0.0000163679 -0.0000476413 0.0000063818 -0.0001340908 -0.0000176204 -0.0000959989 -0.0000331991 -0.0000482731 0.0000410346 -0.0000056903 -0.0000387460 -0.0000031981 0.0000255255 -0.0000603440 0.0000186747 0.0000143536 -0.0000256176 0.0000054611 0.0000070124 -0.0000130002 -0.0000970751 -0.0000015647 -0.0000482932 0.0000028225 0.0000480852 -0.0000835243 -0.0000063005 0.0000254012 0.0000029637 -0.0000000031 0.0000087962 0.0000079347 -0.0000897071 -0.0000659443 0.0000019994 -0.0000054463 0.0000047941 0.0000193255 0.0000094416 -0.0000093592 -0.0000242116 0.0000459355 0.0000477547 0.0000511029 -0.0000067140 -0.0000106144 -0.0000117803 -0.0001398607 0.0001293947 0.0003419450 -0.0002258764 -0.0002706850 -0.0002874100 -0.0001375559 0.0000994333 0.0003235992 -0.0005170574 -0.0005313562 -0.0005631215 -0.0000030060 0.0000024333 0.0000034612 0.0017965969 -0.0013652585 -0.0038971928 0.0026994559 0.0031293699 0.0031565488 0.0000112494 0.0000229533 0.0000534383 0.0000332922 -0.0000444176 -0.0000412478 -0.0000186984 0.0000145742 0.0000004955 -0.0000572963 -0.0000196584 -0.0001170880 0.0000068173 -0.0000228270 -0.0000360591 -0.0003079517 -0.0000810670 -0.0007099108 -0.0003087845 0.0004952736 0.0005116973 0.0000239184 -0.0000151535 -0.0000001377 0.0006708027 0.0001459732 0.0012647068 -0.0001719059 0.0003542063 0.0003896058 -0.0000006610 -0.0000012412 -0.0000001016 0.0000031698 0.0000000813 0.0000012718 -0.0000083313 0.0000031690 -0.0000059651 -0.0000086005 0.0000059991 0.0000035754 0.0000471802 -0.0000714302 -0.0000051813 0.0006656440 0.0002738776 0.0000175453 0.0001659104 0.0007739522 -0.0000267997 -0.0008241192 0.0013029622 0.0005891516 -0.0018521786 -0.0075557833 0.0001943884 0.0102546510 -0.0111617581 -0.0070567672 -0.0031052347 -0.0154749273 0.0009845133 -0.0044805749 -0.0011850162 0.0026290668 0.0383369784 0.1771463490 -0.0073913671 0.0459916468 0.0171650826 -0.0260602820 0.0021279026 -0.0015510500 0.0013714746 0.0001036826 -0.0003450886 0.0000032418 0.0104648730 0.0814229648 -0.0009032470 -0.0209460650 0.0130897137 -0.0132996768 -0.1004663796 -0.9227463710 0.0130886294 0.1998699559 -0.1644530412 0.1302509646 0.0000160814 -0.0039552871 0.0002148343 -0.0066839557 -0.0046998405 -0.0034731660 0.0032692218 0.0400146573 -0.0000519672 0.0727365794 0.0391390936 0.0388013361 0.0000011971 0.0000073313 0.0000001837 -0.0000652094 -0.0000585102 0.0000314046 0.0000151688 -0.0000326657 0.0000255988 0.0000461157 -0.0000546619 -0.0000322203 -0.0000064419 0.0000048863 -0.0000010038 0.0000144421 -0.0000449847 0.0000457397 0.0000058518 0.0000173884 0.0000106949 0.0000484567 -0.0000673863 -0.0000449623 0.0000009429 -0.0000395748 -0.0002604115 -0.0002126879 -0.0001467778 -0.0000579711 0.0001320325 0.0000493398 -0.0000221866 -0.0000425305 0.0000249003 0.0000021200 0.0002101206 -0.0000877588 -0.0001130785 0.0000167480 0.0000104392 0.0000028317 0.0000021044 0.0000000079 -0.0000054344 -0.0000013043 0.0000023891 -0.0000007829 0.0000012542 0.0000011776 0.0000006927 -0.0000043706 -0.0000429131 -0.0000029102 0.0000054092 -0.0000161917 0.0000381029 -0.0000965388 -0.0002105011 0.0003458903 -0.0000759269 0.0000048860 -0.0000963794 0.0000171134 -0.0000018772 0.0000182298 0.0000581811 0.0000685481 0.0000557307 0.0102283369 0.0044812781 0.0039804664 0.0000044177 0.0001411897 0.0002060599 -0.0000019837 -0.0000139698 -0.0000161912 0.0000226039 0.0000094075 -0.0000112546 0.0000245521 0.0000173608 -0.0000221178 0.0000051726 0.0000069208 -0.0000001746 0.0000154214 0.0000189579 -0.0000168993 -0.0000149368 -0.0000126903 0.0000111479 -0.0002378745 -0.0000970989 0.0002823529 -0.0000422049 -0.0000490487 0.0000007186 -0.0001990525 -0.0000693497 0.0002609376 -0.0007712727 -0.0003645254 -0.0003068387 -0.0003398568 -0.0001689327 -0.0000931334 0.0040579506 0.0022540445 0.0012485960 -0.0000027034 -0.0000065893 0.0000332429 0.0000260641 -0.0001780327 -0.0007580940 0.0000473174 0.0000399012 0.0000424788 0.0002940219 0.0001821395 -0.0001859338 -0.0005059240 -0.0003487439 -0.0001940201 0.0002990535 0.0001393781 -0.0002225930 -0.0005013779 -0.0004463420 -0.0002535669 -0.0034654875 -0.0017969491 0.0027586438 0.0050724081 0.0040701121 0.0022738672 -0.0030681961 -0.0015598359 0.0025814486 0.0000726518 0.0021682239 0.0083275652 -0.0000660429 -0.0000757043 -0.0002170767 0.0010035575 0.0011104272 0.0034338559 -0.0000022902 -0.0000002169 -0.0000039926 0.0000179995 -0.0000208822 -0.0000059307 -0.0000133032 0.0000113941 0.0000267962 -0.0000048096 -0.0000080327 -0.0000104013 0.0000014044 0.0000007312 0.0000008068 0.0000003103 -0.0000008275 0.0000005124 0.0000063892 -0.0000108308 0.0000013485 -0.0000002871 -0.0000016495 0.0000012497 0.0000080782 0.0000018383 -0.0000036138 0.0000016314 -0.0000010024 0.0000100034 0.0000039456 -0.0000013313 -0.0000026177 0.0000025148 0.0000072005 -0.0000015295 -0.0000136662 -0.0000013502 -0.0000082506 -0.0001014182 0.0000738343 0.0000596058 0.0000013783 0.0000213458 -0.0000812061 0.0000164274 0.0000532634 -0.0000040284 0.0000027620 0.0000076597 -0.0000015475 -0.0000053414 0.0000024365 -0.0000018607 0.0000026574 0.0000087282 -0.0000188137 0.0000007732 0.0000102677 -0.0000103200 -0.0000382290 0.0000047293 -0.0000897418 0.0000084006 0.0000017608 -0.0000029501 -0.0011553978 0.0007378620 0.0025874999 0.0008739171 -0.0002766473 -0.0012409513 -0.0009500501 -0.0012440483 -0.0016169940 -0.0011887257 -0.0011336895 -0.0009533340 -0.0175007697 0.0167396466 0.0438064505 -0.0353654099 -0.0419290514 -0.0443563282 -0.0069328100 0.0046225744 0.0150393262 0.0134506874 0.0140361067 0.0155935458 -0.0000358965 0.0002063082 0.0007074567 0.2318857933 -0.1777801202 -0.5028002774 0.4216550594 0.4849734292 0.4899108585 0.0000036584 0.0000012073 0.0000078072 0.0000066258 -0.0000110926 -0.0000123556 -0.0000002696 0.0000013540 0.0000017866 -0.0000239481 -0.0000082116 -0.0000504442 -0.0000309739 0.0000583003 0.0000653483 -0.0000441044 -0.0000105336 -0.0000858693 -0.0000749914 0.0001254193 0.0001366835 0.0000000799 -0.0000004294 -0.0000010406 0.0003069822 0.0000641664 0.0005738066 0.0003700174 -0.0006821740 -0.0007314647 -0.0001598853 -0.0001663405 -0.0003208202 0.0000425619 -0.0000111791 -0.0000853831 -0.0000003968 0.0000002262 0.0000001774 0.0000000412 -0.0000000532 0.0000001116 -0.0000159573 -0.0000193110 0.0000147030 -0.0000026326 -0.0000051080 -0.0000014398 0.0000086340 0.0000028410 -0.0000042054 -0.0000083347 -0.0000012293 0.0000041195 -0.0000153635 -0.0000116374 0.0000050447 0.0000569503 -0.0000487937 -0.0000379181 0.0000187995 0.0001032287 -0.0000023907 0.0000348559 0.0000100581 -0.0000203613 -0.0002394461 -0.0011369764 0.0000448726 -0.0003611104 -0.0001295960 0.0001982819 -0.0000122539 0.0000108782 -0.0000065648 -0.0000006143 0.0000006095 -0.0000002455 -0.0000707474 -0.0005477774 0.0000048394 0.0001422175 -0.0000887376 0.0000896116 0.0006759288 0.0062225323 -0.0000874663 -0.0013629154 0.0011216915 -0.0008854260 0.0000001320 0.0000287854 -0.0000017373 0.0000442405 0.0000309965 0.0000226931 -0.0000256219 -0.0002921383 -0.0000006932 -0.0004861610 -0.0002598466 -0.0002592577 0.0000028747 0.0000026953 -0.0000055283 -0.0000275477 -0.0000142098 0.0000087492 0.0000030610 -0.0000141367 0.0000150004 -0.0000288461 0.0000306033 0.0000313907 0.0000153457 0.0000076736 0.0000189758 -0.0000133218 0.0000373000 -0.0000463708 -0.0001336335 -0.0001503098 -0.0002438894 -0.0000314022 0.0000600021 0.0000386238 0.0000031561 -0.0000078063 -0.0000073028 -0.0000716477 -0.0003504052 -0.0000157994 0.0000042765 0.0000313703 0.0000030864 0.0000045966 -0.0000049795 -0.0000040575 -0.0000429633 0.0000405485 0.0000178945 -0.0000650367 -0.0000000688 -0.0000414735 0.0000208751 0.0000004305 0.0000116533 0.0000206378 0.0001098210 -0.0000112289 0.0000083760 0.0000548126 0.0001076568 -0.0001940431 -0.0013032764 -0.0000177357 0.0000875183 0.0000759782 -0.0000091675 0.0000624148 -0.0000154518 0.0000344388 -0.0000726957 -0.0001601315 -0.0001229487 -0.0000052449 0.0000857236 0.0000356386 0.0001350819 0.0001869563 0.0001093289 0.0370838143 0.0169033570 0.0143411700 0.0000146323 0.0008256207 0.0011800884 -0.0000098858 -0.0000792914 -0.0001006112 0.0000991042 0.0000573407 0.0000032322 0.0000889496 0.0000779636 -0.0000489317 -0.0000587275 -0.0000753189 -0.0000135007 -0.0000784059 0.0000006432 0.0001345731 -0.0000685735 -0.0000747555 0.0000241758 -0.0006591889 -0.0002713125 0.0007389846 0.0007374086 0.0009500482 0.0000702764 0.0009374015 0.0002993540 -0.0011844397 -0.0027944534 -0.0013429414 -0.0011241944 -0.0007611913 -0.0002728604 -0.0001723835 0.0093026182 0.0049170664 0.0028311826 -0.0002201225 -0.0001769427 -0.0000409041 -0.0000307882 0.0000086277 0.0001217005 -0.0000285143 -0.0000076215 0.0000224157 0.0041328791 0.0021348481 -0.0035471453 0.0005434496 0.0005021607 0.0005073572 -0.0001120436 -0.0000592685 0.0000695858 -0.0002385921 -0.0002112095 -0.0000565977 -0.0466413364 -0.0241155505 0.0395673537 -0.0062332333 -0.0050761412 -0.0031106076 0.0010012658 0.0005025852 -0.0008822039 0.0000031354 -0.0002270491 -0.0009229765 -0.0003836586 -0.0004565778 -0.0012702808 0.0059405107 0.0070866064 0.0200760321 0.0002478374 -0.0008069326 -0.0011150612 0.0000895352 -0.0001071639 -0.0000299099 -0.0000638889 0.0000772784 0.0001543898 -0.0000386834 -0.0000772682 -0.0000675859 0.0000372503 0.0000131725 0.0000214095 0.0000074133 -0.0000110298 -0.0000125356 -0.0000472690 -0.0000449456 -0.0000870067 -0.0000055228 0.0000049272 0.0000018976 0.0000405980 0.0000054315 -0.0000212892 -0.0000211958 0.0000152383 0.0000207717 -0.0002277797 0.0000715406 0.0001218027 0.0000181925 0.0000212551 0.0000459797 -0.0000806990 0.0000047887 -0.0001299173 -0.0004731095 0.0008583105 0.0005581959 -0.0000123546 -0.0003193545 0.0005378904 0.0008838210 -0.0000443766 -0.0004029881 -0.0000149104 -0.0001062269 -0.0000409628 -0.0001703705 0.0000418478 -0.0000093033 0.0000267001 0.0000084862 -0.0000346517 0.0000827332 -0.0001994432 -0.0000038836 -0.0000110202 -0.0000072557 -0.0001031945 0.0001128667 0.0000678086 -0.0000143648 -0.0000181022 0.0000200520 0.0000399109 0.0000142636 0.0000025380 -0.0000044523 -0.0001263125 -0.0001306478 -0.0001469300 0.0000233767 0.0000427553 0.0000565623 0.0005768589 -0.0003941414 -0.0011603921 -0.0005244011 -0.0005444729 -0.0005147657 -0.0000343553 0.0000392667 0.0001201820 0.0014981139 0.0015012770 0.0016778268 0.0000233405 0.0000010417 -0.0000055141 -0.0060774370 0.0045651451 0.0129598100 0.0052380796 0.0059909306 0.0059596011 0.0109826880 -0.0008529216 0.0156146680 -0.0310714100 0.0513109618 0.0554594415 -0.0014434281 -0.0012068244 -0.0042178725 0.0133374222 0.0021751238 0.0235760445 -0.0043740417 0.0062559238 0.0054604494 -0.0885460257 -0.0141632464 -0.1720039021 0.3480241251 -0.5738246889 -0.6269360334 -0.0001997246 0.0006954077 0.0014496821 -0.1449001819 -0.0295769855 -0.2680576725 0.0360627027 -0.0644915912 -0.0676389310 0.0000000528 0.0000015301 0.0000026967 -0.0000159353 -0.0000024997 -0.0000068849 0.0001941892 -0.0002301368 -0.0002433495 -0.0002538283 -0.0001154235 -0.0006571041 0.0000013181 -0.0000030228 -0.0000013202 0.0000003922 0.0000046889 0.0000006684 0.0000085740 0.0000337897 -0.0000011892 -0.0000211157 0.0000230997 0.0000140194 -0.0000841100 -0.0003557992 0.0000072289 0.0002465250 -0.0002584949 -0.0001691874 -0.0000105547 -0.0000627321 0.0000021782 -0.0000320084 -0.0000116100 0.0000183776 0.0001437266 0.0006880581 -0.0000181437 0.0003474964 0.0001312689 -0.0001984476 -0.0000071482 -0.0000096843 -0.0000034994 -0.0000048751 0.0000018662 -0.0000092301 0.0000187830 0.0001107281 0.0000028071 -0.0000362736 0.0000194683 -0.0000233087 -0.0001561049 -0.0012780695 -0.0000148864 0.0003274574 -0.0002725248 0.0002113042 0.0000056600 -0.0000013390 0.0000017276 -0.0000090903 -0.0000019846 -0.0000043902 -0.0000041347 0.0000226583 -0.0000090978 0.0000952231 0.0000527797 0.0000516068 0.0000139546 0.0000210094 -0.0000291950 -0.0001980264 -0.0001084818 0.0000690725 0.0000435812 -0.0001298949 0.0000914974 -0.0001277974 0.0001608450 0.0001048921 0.0001172707 -0.0000054556 0.0001117541 -0.0001948381 0.0004537285 -0.0005795333 -0.0007855520 -0.0007870534 -0.0013185802 -0.0005166196 0.0006606276 0.0003970385 0.0000318883 -0.0000811092 -0.0000815864 -0.0007619685 -0.0038279848 -0.0001526195 0.0000462916 0.0003410461 0.0000344856 0.0000730667 -0.0000404448 -0.0000502870 -0.0004507933 0.0004393135 0.0001759863 -0.0004414843 -0.0001441888 -0.0003003795 0.0000948673 0.0000009827 0.0000507263 -0.0000504275 -0.0002006116 -0.0000171786 0.0001211051 0.0000345065 0.0000447366 0.0003972749 0.0027467743 0.0002544278 0.0008669961 0.0006458070 0.0002291784 0.0006317972 -0.0001498844 0.0004488104 -0.0006432950 -0.0018273027 -0.0015634937 -0.0001570856 0.0011198823 0.0006198640 0.0014822649 0.0020952805 0.0012928940 0.4126785178 0.1881337152 0.1595987459 0.0001782955 0.0092516660 0.0132637966 -0.0001046253 -0.0008853100 -0.0011327060 0.0010929345 0.0006307398 0.0000343564 0.0009731822 0.0008541368 -0.0005398142 -0.0006810939 -0.0008720417 -0.0001511716 -0.0008429744 0.0000215670 0.0014587305 -0.0007313612 -0.0007934229 0.0002722929 -0.0071888284 -0.0029889280 0.0081007428 0.0085218261 0.0109324849 0.0008085368 0.0100736683 0.0031410845 -0.0126861003 -0.0311339848 -0.0149207421 -0.0124954375 -0.0083176363 -0.0030034178 -0.0019028132 0.1024571536 0.0541521630 0.0312005108 -0.0026362840 -0.0021057556 -0.0005043164 -0.0003664538 0.0001198448 0.0014913811 -0.0003378520 -0.0001000304 0.0002476292 0.0492538413 0.0254529834 -0.0422535435 0.0062618555 0.0058275632 0.0059225575 -0.0013611629 -0.0007228128 0.0008702443 -0.0026219033 -0.0023145841 -0.0006028221 -0.5560420159 -0.2875177233 0.4715133165 -0.0719662031 -0.0589083245 -0.0357780800 0.0123996050 0.0062595192 -0.0108927364 -0.0000033368 -0.0027870737 -0.0112534085 -0.0042833205 -0.0051168581 -0.0141374635 0.0660794538 0.0793529608 0.2233294849 -0.0000527640 0.0000414275 0.0000463043 0.0009663648 -0.0011297184 -0.0002917489 -0.0006956532 0.0006408467 0.0014704818 -0.0002785600 -0.0006225071 -0.0005615501 0.0001289653 0.0001530176 0.0000643212 0.0000395695 -0.0000331651 0.0000174819 0.0000202117 -0.0000411541 -0.0001950608 0.0000171404 -0.0000126612 0.0000045500 0.0004570246 0.0000911689 -0.0002122022 -0.0002909248 0.0001214639 0.0002241461 0.0001387748 0.0002425663 0.0000921293 0.0001043546 -0.0004540453 0.0001007661 -0.0011430429 -0.0000023175 -0.0006180401 -0.0007448683 0.0011936108 0.0009119530 0.0000535219 -0.0007855459 0.0011063254 -0.0000321221 0.0003545220 -0.0001777084 0.0000280968 -0.0005890121 -0.0002437687 -0.0007485430 0.0001549301 -0.0001513419 0.0000674979 0.0000778527 -0.0000158456 0.0008247407 -0.0021132395 -0.0000854816 -0.0001380530 -0.0001163437 -0.0010580126 0.0017874967 0.0011794826 -0.0001140366 -0.0002118238 0.0002236395 0.0004742231 0.0001282505 0.0000357468 -0.0000085921 -0.0012366481 -0.0012733011 -0.0014446207 0.0002944528 0.0005131569 0.0006699206 0.0070239241 -0.0048121044 -0.0141584372 -0.0062657232 -0.0064789832 -0.0061245721 -0.0002046096 0.0003184012 0.0009854331 0.0147748086 0.0146966461 0.0166007062 0.0002775610 0.0000011203 -0.0000803812 -0.0741538379 0.0556583451 0.1581331913 0.0624237483 0.0712951729 0.0710221251 -0.0012366085 0.0000926824 -0.0017705496 0.0033863031 -0.0056021240 -0.0060683595 0.0002171136 -0.0000232057 0.0002558677 0.0016109016 0.0003366760 0.0029844532 -0.0004639574 0.0006457809 0.0005465872 0.0099140301 0.0015123816 0.0192075675 -0.0379438368 0.0626046391 0.0684502155 0.0001697045 -0.0001090583 -0.0000224428 -0.0178397969 -0.0037250998 -0.0332628627 0.0035394887 -0.0064557132 -0.0063321595 0.0000001179 0.0000265983 0.0000408505 -0.0001818030 -0.0000302104 -0.0000809163 -0.0000586296 0.0000069363 -0.0000557823 -0.0000279449 0.0000353905 0.0000699044 0.0000163793 -0.0000351120 -0.0000168754 -0.0000192289 0.0000386853 0.0000191594 0.0000847846 0.0003371620 -0.0000110872 -0.0002010080 0.0002128579 0.0001333980 -0.0008233163 -0.0035730467 0.0000972698 0.0023582681 -0.0024440745 -0.0015822554 -0.0000468148 -0.0003544284 -0.0000007370 -0.0002735525 -0.0001038574 0.0001545983 0.0007313293 0.0037011908 -0.0001027273 0.0030534884 0.0011573058 -0.0017015076 -0.0000292836 -0.0000290369 -0.0000147421 0.0000174292 0.0000203935 0.0000088693 0.0000598440 0.0002695788 0.0000105065 -0.0001929957 0.0001554361 -0.0001269563 -0.0004116301 -0.0028815065 -0.0000019302 0.0020992452 -0.0017505327 0.0013740104 -0.0000142620 -0.0002398391 0.0000023083 -0.0001908613 -0.0000975576 -0.0001012379 0.0002362301 0.0025549402 0.0000207104 0.0022101299 0.0011364541 0.0011905732 0.0000823427 0.0002144794 -0.0002740842 -0.0017850205 -0.0009590365 0.0004634055 0.0004768255 -0.0013754597 0.0010237042 -0.0010460716 0.0014579193 0.0009437494 0.0012592952 0.0004875338 0.0015448150 -0.0009752629 0.0031840100 -0.0036855697 -0.0112746818 -0.0113112609 -0.0204649040 -0.0035266360 0.0053747553 0.0034368969 -0.0000267111 0.0000413104 0.0001945342 0.0003020215 0.0008877339 0.0000448488 -0.0001036478 -0.0001242513 0.0000174297 0.0000519348 -0.0000270640 -0.0000168043 -0.0002567820 0.0001697506 0.0001292219 -0.0001141889 -0.0000417276 -0.0000716053 0.0000197241 -0.0000011936 0.0000161613 -0.0000105701 -0.0000460214 -0.0000042339 0.0000280620 0.0000096213 0.0000135859 0.0000894168 0.0006259233 0.0000566657 0.0001999675 0.0001602890 0.0000243531 0.0002233146 0.0001036259 -0.0001425598 -0.0001007998 -0.0004199173 -0.0002891675 -0.0000387618 0.0002613279 0.0001207570 0.0003060460 0.0004349746 0.0002589833 0.0874354428 0.0400183032 0.0338022838 0.0000362534 0.0020040799 0.0028843223 -0.0000300427 -0.0001948521 -0.0002437441 0.0002362931 0.0001254485 0.0000166363 0.0002078525 0.0001895698 -0.0001028482 -0.0001707204 -0.0002260678 -0.0000429195 -0.0001865875 -0.0000111781 0.0003596189 -0.0001517825 -0.0001718468 0.0000439777 -0.0014797642 -0.0006188780 0.0016654168 0.0021646907 0.0027490888 0.0002132883 0.0024412397 0.0006871583 -0.0030282225 -0.0065922491 -0.0031633181 -0.0026468569 -0.0017028477 -0.0005777515 -0.0003770803 0.0209358469 0.0110087150 0.0063409851 -0.0005916694 -0.0004885980 -0.0000802266 -0.0000541752 -0.0000960277 -0.0001933949 -0.0000087621 0.0000325860 0.0001181240 0.0115799956 0.0060217282 -0.0099105042 0.0015009765 0.0014632260 0.0014097202 -0.0000748827 -0.0000777364 -0.0000001287 -0.0014873506 -0.0012244539 -0.0005439998 -0.1310405663 -0.0677369367 0.1112104789 -0.0178172897 -0.0148386063 -0.0089138728 0.0002142820 0.0001430553 -0.0003214818 0.0000307729 0.0009947250 0.0034129277 -0.0009317934 -0.0011139488 -0.0030726073 0.0143634442 0.0172804331 0.0485501505 -0.0000204690 -0.0000015389 -0.0000261191 0.0002102498 -0.0002468596 -0.0000629617 -0.0001448717 0.0001457167 0.0003280264 -0.0000652704 -0.0001357100 -0.0001276490 0.0000305234 0.0000301078 0.0000153472 0.0000049489 -0.0000068810 0.0000047703 0.0000041263 -0.0000133074 -0.0000427852 0.0000038552 -0.0000024810 0.0000031658 0.0000960344 0.0000186782 -0.0000457576 -0.0000524953 0.0000299562 0.0000517674 0.0000528522 0.0000327820 -0.0000011247 0.0000278768 -0.0000754233 0.0000193332 -0.0002447367 -0.0000009975 -0.0001364870 -0.0002048888 0.0002867656 0.0002433271 0.0000132265 -0.0002018326 0.0001995640 0.0000276014 0.0001652418 -0.0000533024 0.0000064386 -0.0001253519 -0.0000538849 -0.0001885125 0.0000342617 -0.0000409510 0.0000206086 0.0000187570 -0.0000220894 0.0001733873 -0.0004405090 -0.0000217357 -0.0000429398 -0.0000223375 -0.0002702277 0.0003014903 0.0001912340 -0.0000293787 0.0010736551 -0.0005651634 -0.0022258199 -0.0005150066 -0.0004342166 -0.0003482647 0.0048814632 0.0048696200 0.0049419773 -0.0017391426 -0.0021403599 -0.0024589494 -0.0300019149 0.0205282233 0.0605991013 0.0293630665 0.0303958780 0.0291121040 -0.0003301091 0.0009432148 0.0021196426 -0.0542040122 -0.0555180588 -0.0599907885 -0.0000939117 0.0003404013 0.0010976536 0.3176281662 -0.2378931846 -0.6768497556 -0.2967965637 -0.3378915645 -0.3390620621 -0.0001247883 0.0000036482 -0.0001905961 0.0003050435 -0.0005111162 -0.0005603110 0.0000461059 -0.0000539747 -0.0000370168 0.0010547609 0.0002017046 0.0019195519 -0.0003577292 0.0005260703 0.0004739014 0.0010288267 0.0001539787 0.0019949120 -0.0034512924 0.0056967239 0.0062395415 0.0000388368 -0.0000112343 0.0000318461 -0.0116109557 -0.0023992846 -0.0215498623 0.0030011230 -0.0054149264 -0.0055963782 -0.0001768195 -0.0002163906 -0.0004448608 0.0001183815 -0.0000291469 -0.0001786471 -0.0000082930 -0.0000062505 -0.0000230787 -0.0000113967 0.0000068500 0.0000042411 0.0000127097 0.0000125222 -0.0000082276 -0.0000099953 0.0000147082 0.0000063271 0.0000067876 0.0000408065 -0.0000000673 -0.0000257342 0.0000292793 0.0000171599 -0.0001032253 -0.0004714088 0.0000160202 0.0003160748 -0.0003366175 -0.0002108439 0.0000029416 -0.0000260040 -0.0000067537 -0.0000553342 -0.0000204044 0.0000313051 0.0000164673 0.0001984536 -0.0000037963 0.0006118124 0.0002299889 -0.0003367396 -0.0000092390 -0.0000064556 -0.0000057392 0.0000039577 0.0000064271 0.0000019980 0.0000062246 0.0000067944 0.0000029610 -0.0000307916 0.0000270592 -0.0000201986 -0.0000152597 -0.0000307462 0.0000146840 0.0003596669 -0.0002990082 0.0002317730 -0.0000036478 -0.0000553763 0.0000003251 -0.0000377963 -0.0000182259 -0.0000199636 0.0000551924 0.0005917913 0.0000021389 0.0004442019 0.0002271935 0.0002363729 0.0000126971 0.0000490150 -0.0000551134 -0.0003731814 -0.0002017946 0.0000937059 0.0000997318 -0.0002967294 0.0002113109 -0.0001762621 0.0002705349 0.0001631202 0.0002753387 0.0001349321 0.0003776439 -0.0002394413 0.0007681630 -0.0008871508 -0.0026693033 -0.0026585570 -0.0047961709 -0.0005663290 0.0009415046 0.0006535013 -0.0000016873 0.0000044555 0.0000000113 0.0000268918 0.0001511782 0.0000051702 0.0000004119 -0.0000128571 -0.0000025413 -0.0000024532 0.0000020701 0.0000063748 0.0000396090 -0.0000363776 -0.0000161776 0.0001669983 0.0000182219 0.0000957983 -0.0000430017 -0.0000032165 -0.0000136584 0.0000209624 -0.0002363867 0.0000025973 0.0000456796 0.0000017182 0.0001139368 0.0001755480 0.0020680170 0.0001282155 -0.0000743753 0.0000399844 -0.0001435653 -0.0000408759 0.0000188200 -0.0000326090 -0.0000024560 0.0000920389 0.0001232668 0.0000133958 -0.0000737679 -0.0000407686 -0.0000773208 -0.0001021967 -0.0000780583 -0.0207539188 -0.0095298794 -0.0080835651 -0.0000098769 -0.0003200708 -0.0004609794 0.0000073147 0.0000333749 0.0000379365 -0.0000524205 -0.0000364318 -0.0000092434 -0.0000301430 -0.0000393414 0.0000019531 0.0000200880 0.0000282313 0.0000097134 0.0000360834 -0.0000024693 -0.0000652785 0.0000369411 0.0000431818 -0.0000111720 0.0001347426 0.0000799558 -0.0001435849 -0.0002918192 -0.0003726303 -0.0000292213 -0.0004540289 -0.0001402995 0.0005591275 0.0015667418 0.0007562524 0.0006347262 0.0003724231 0.0001173509 0.0000810636 -0.0047353371 -0.0024693418 -0.0014673314 0.0002338880 0.0001856303 0.0000479941 0.0000334126 -0.0000019335 -0.0000982638 0.0000175182 -0.0000003381 -0.0000267391 -0.0043774782 -0.0022596268 0.0037585396 -0.0005313594 -0.0004987199 -0.0005135952 0.0000933425 0.0000508285 -0.0000571201 0.0003363761 0.0002828726 0.0001101121 0.0495939549 0.0255297274 -0.0420286789 0.0061046059 0.0050001502 0.0030404989 -0.0008142025 -0.0004116046 0.0007149673 -0.0000050423 0.0001459314 0.0006212308 0.0002396108 0.0002933427 0.0007935774 -0.0036849972 -0.0045824330 -0.0124972368 -0.0011293414 0.0002946633 -0.0013896233 -0.0000520856 0.0000584863 0.0000129339 0.0000231671 -0.0000349211 -0.0000742847 0.0000215948 0.0000313056 0.0000304923 -0.0000177793 0.0000018019 -0.0000036956 0.0000126327 -0.0000060324 -0.0000036868 -0.0000036495 0.0000167213 0.0000480669 0.0000016926 0.0000008313 -0.0000050256 -0.0000145210 -0.0000027611 0.0000079305 0.0000026930 -0.0000047150 -0.0000110960 -0.0003502857 0.0001331229 0.0000384992 0.0000455484 -0.0000395494 -0.0000168081 0.0002091239 -0.0000026583 0.0000290023 0.0004249614 -0.0004404884 -0.0002899491 -0.0000069937 0.0001424136 -0.0002962895 -0.0002443419 0.0000374742 0.0000656037 0.0000070284 0.0000204599 0.0000044543 0.0000896211 -0.0000137347 0.0000138008 -0.0000124368 -0.0000278296 0.0000556722 -0.0000231946 0.0000405386 0.0000110274 0.0000177022 0.0000041243 0.0000676317 -0.0000064478 0.0000039823 0.0000058402 -0.0000119157 0.0000026456 0.0000266474 0.0000110323 0.0000058166 -0.0000017555 -0.0000768555 -0.0000763636 -0.0000712169 0.0000223051 0.0000230534 0.0000242918 0.0003308081 -0.0002241688 -0.0006671308 -0.0003631398 -0.0003758135 -0.0003641963 -0.0000271012 -0.0000045296 0.0000095383 0.0008068456 0.0008511281 0.0008811632 -0.0000110591 -0.0000090491 -0.0000222577 -0.0034987774 0.0026108756 0.0074595158 0.0037231225 0.0042190652 0.0042624839 -0.0043443088 -0.0001173328 -0.0070667889 0.0100605591 -0.0170183272 -0.0187979612 0.0020045237 -0.0021674753 -0.0013295721 0.0368495013 0.0069781997 0.0669656270 -0.0153201674 0.0237486682 0.0226135147 0.0384446848 0.0065273763 0.0753956842 -0.1149828876 0.1896775106 0.2077725760 0.0004563442 0.0000247641 0.0007387386 -0.4050599209 -0.0836961692 -0.7510568603 0.1388014791 -0.2500934841 -0.2635742145 0.0000036353 0.0000044260 0.0000085915 0.0000059876 0.0000030710 0.0000086429 0.0000880917 -0.0002744113 -0.0004876533 -0.0000793897 0.0000889980 0.0001099785 -0.0000009714 0.0000020850 0.0000009710 0.0000012651 -0.0000042503 -0.0000013222 -0.0000052817 -0.0000205121 0.0000006337 0.0000120692 -0.0000131169 -0.0000082181 0.0000497124 0.0002121833 -0.0000074686 -0.0001466242 0.0001506528 0.0000964262 0.0000048557 0.0000335431 0.0000007868 0.0000224959 0.0000074994 -0.0000127178 -0.0000725246 -0.0003469332 0.0000190501 -0.0002537168 -0.0000957784 0.0001392311 0.0000128966 0.0000059273 0.0000062326 0.0000013159 0.0000153518 0.0000027196 0.0000079185 0.0000991312 -0.0000056840 -0.0000045323 0.0000032401 -0.0000027601 -0.0001157240 -0.0011386953 0.0000028796 0.0000459374 -0.0000381409 0.0000323384 -0.0000022923 -0.0000257288 0.0000001056 -0.0000142719 -0.0000095251 -0.0000079043 0.0000214204 0.0002157881 0.0000052289 0.0001626557 0.0000735587 0.0000861929 -0.0000050312 -0.0000072147 0.0000016836 0.0001301998 0.0000789155 -0.0000138006 0.0000285859 -0.0000216138 0.0000404107 0.0000072437 -0.0000327311 -0.0000215230 -0.0000955773 -0.0001114157 -0.0001633999 -0.0001579393 0.0000667086 -0.0001979622 0.0013150113 0.0012332702 0.0024986467 0.0000345361 -0.0002183077 -0.0001172358 0.0000349990 0.0000435452 0.0000260551 -0.0003952209 -0.0017947312 -0.0000384922 0.0000415787 0.0001672903 -0.0000134536 -0.0000186830 0.0000093670 0.0000082142 0.0000700722 -0.0000256289 -0.0000420918 0.0000072515 0.0000032416 0.0000037759 0.0000019706 -0.0000014960 -0.0000014530 -0.0000003425 -0.0000018051 -0.0000000705 -0.0000005674 0.0000000524 -0.0000002475 -0.0000009429 0.0000248168 -0.0000001068 -0.0000084763 -0.0000056438 0.0000040710 -0.0000281063 -0.0000155651 0.0000398370 0.0000055155 0.0000029949 -0.0000085780 -0.0000015898 -0.0000015748 0.0000012069 -0.0000016453 0.0000008931 -0.0000032743 -0.0001414906 -0.0001319673 0.0000644094 0.0000107705 0.0003361391 0.0005638208 -0.0000606919 -0.0000482862 -0.0000293635 0.0000773531 -0.0001249346 0.0001262339 0.0000636972 0.0000718215 0.0000133759 -0.0003071240 -0.0004424011 -0.0000983984 -0.0001887079 -0.0001849495 0.0005868211 0.0000692275 0.0000038289 -0.0001289339 -0.0003069643 -0.0000914229 0.0004236615 0.0039905018 0.0048537209 0.0005001924 0.0039949845 0.0003977694 -0.0041222069 -0.0000222198 0.0000837782 0.0000482455 0.0000437394 0.0000581273 0.0000099703 -0.0005528287 -0.0003268982 -0.0001705798 -0.0000200480 -0.0000213450 -0.0000078207 -0.0000067196 0.0000067670 0.0000498375 0.0000141728 0.0000118367 0.0000045290 0.0003687515 0.0001848449 -0.0003130899 0.0000261814 0.0000207700 0.0000272830 -0.0000313655 -0.0000139687 0.0000260781 -0.0001951286 -0.0001551665 -0.0000782005 -0.0041725899 -0.0021356210 0.0035128805 -0.0002473629 -0.0001757772 -0.0001151606 0.0003518983 0.0001679701 -0.0002933179 -0.0000054586 -0.0001426933 -0.0005224860 -0.0000002441 0.0000050838 0.0000205022 -0.0000386445 0.0000187181 -0.0002137643 0.0000000574 0.0000000686 -0.0000014551 0.0000015888 -0.0000019951 0.0000016536 -0.0000037442 0.0000015037 0.0000042329 -0.0000002544 -0.0000030096 -0.0000020658 -0.0000004551 0.0000009109 0.0000002034 -0.0000011478 0.0000029441 0.0000029580 0.0000079705 -0.0000073106 -0.0000071999 0.0000035418 0.0000011869 0.0000020027 0.0000031505 0.0000004036 -0.0000011817 -0.0000010193 0.0000039620 0.0000019787 0.0000324245 -0.0000155389 -0.0000335982 -0.0000027810 -0.0000302578 -0.0000041475 -0.0000192684 -0.0000059037 -0.0000099587 -0.0001048511 0.0000849271 0.0000609537 -0.0000036608 -0.0000108060 0.0000231545 0.0000057652 0.0000230149 -0.0000041358 -0.0000085925 -0.0000273055 -0.0000087256 -0.0000367438 -0.0000034006 -0.0000172641 -0.0000028053 0.0000037290 -0.0000106174 0.0000127333 -0.0000447565 0.0000015837 -0.0000094571 -0.0000001271 -0.0000179895 -0.0000084506 -0.0000115865 -0.0000026351 -0.0007745976 -0.0005581067 -0.0002187491 -0.0088131272 0.0024131077 0.0126720248 0.0474839838 0.0497010645 0.0531310379 0.0018420435 -0.0011209550 -0.0033846052 0.0022404128 -0.0019929695 -0.0053245884 -0.0039270255 -0.0043721925 -0.0044301223 0.0591392343 -0.0409829141 -0.1335749506 -0.5389464458 -0.5525227974 -0.6021375613 0.0005111073 0.0004895707 0.0009335674 -0.0259362334 0.0198474584 0.0561736061 0.0420686272 0.0481503700 0.0483540835 0.0000057911 0.0000003306 0.0000102964 -0.0000078186 0.0000117408 0.0000119312 0.0000006395 -0.0000023656 -0.0000034118 0.0000348125 0.0000069991 0.0000645117 -0.0000092192 0.0000125328 0.0000107922 -0.0000613389 -0.0000067755 -0.0001183501 0.0000757008 -0.0001270002 -0.0001431783 -0.0000006649 0.0000007041 0.0000008767 -0.0003956403 -0.0000791668 -0.0007307598 0.0000702718 -0.0001211276 -0.0001352653 -0.0001531454 -0.0000619216 -0.0000211206 0.0001409195 -0.0002132345 -0.0006056153 0.0000002986 -0.0000007958 -0.0000003100 -0.0000002226 -0.0000003153 -0.0000003707 -0.0000003995 -0.0000075747 -0.0000047635 0.0000040713 -0.0000066092 -0.0000037550 0.0000007270 0.0000126175 0.0000006065 -0.0000033410 0.0000069867 0.0000035518 -0.0000148253 -0.0000885760 -0.0000059294 0.0000598290 -0.0000496393 -0.0000347449 -0.0000042580 -0.0000119664 0.0000028520 0.0000014610 -0.0000015288 -0.0000010672 0.0000301308 0.0001246483 -0.0000113087 0.0000039915 0.0000046693 -0.0000014633 -0.0000022844 0.0000035529 -0.0000014682 0.0000000970 0.0000002710 0.0000003276 -0.0000112236 -0.0000843786 0.0000005560 0.0000202616 -0.0000121735 0.0000131209 0.0001104123 0.0009703067 0.0000012461 -0.0001949293 0.0001666709 -0.0001260978 -0.0000005985 -0.0000033962 -0.0000000827 0.0000025739 0.0000032685 0.0000014618 0.0000028667 0.0000530748 0.0000005992 -0.0000355361 -0.0000123256 -0.0000173691 -0.0000080951 -0.0000016858 0.0000014919 0.0000666416 0.0000366922 -0.0000326550 0.0000239031 -0.0000484024 0.0000171349 0.0000006198 -0.0000000116 -0.0000530854 -0.0000006505 0.0000131461 0.0000155649 0.0000020020 -0.0000015146 -0.0000045707 -0.0000920167 -0.0000795560 -0.0001470841 0.0000897318 -0.0000886579 -0.0000417759 0.0000906840 -0.0001264220 -0.0000890817 -0.0010307829 -0.0060163851 -0.0002984475 0.0000130878 0.0004846806 0.0000621679 0.0001817120 -0.0000924193 -0.0001187750 -0.0009761157 0.0009428370 0.0004949361 -0.0010480142 -0.0003872584 -0.0006318044 0.0002132141 0.0000138182 0.0001241475 -0.0000975588 -0.0002855441 -0.0000456546 0.0002044998 0.0000928691 0.0000888497 0.0006330204 0.0040882869 0.0004252853 0.0018353222 0.0010260069 0.0001771751 0.0014730098 -0.0006823899 0.0006502590 -0.0025123984 -0.0019753683 -0.0016977317 0.0000696356 0.0010868701 0.0009049326 0.0019380990 0.0024103035 0.0017643134 0.6084927712 0.2758289463 0.2280330623 0.0002723370 0.0098718974 0.0140564909 -0.0001582516 -0.0009524925 -0.0011518183 0.0016749277 0.0009008087 -0.0000019076 0.0011481502 0.0011636047 -0.0004725963 -0.0005830145 -0.0007438629 -0.0001740108 -0.0008073953 0.0001752368 0.0015452956 -0.0010115962 -0.0010995183 0.0003815801 -0.0075021293 -0.0033281886 0.0083813630 0.0080115012 0.0103717176 0.0008758158 0.0096185755 0.0026989833 -0.0118185478 -0.0455140609 -0.0216404404 -0.0179772335 -0.0102572526 -0.0034103681 -0.0021212847 0.1196459593 0.0610059557 0.0341070747 0.0018069117 0.0013465593 0.0004981169 0.0003365124 0.0000523976 -0.0006075602 -0.0000026132 -0.0000357589 -0.0001078473 -0.0345452143 -0.0176790739 0.0298067184 -0.0028686777 -0.0027673820 -0.0032192047 0.0002534792 0.0001502909 -0.0002528620 0.0018512839 0.0010512700 0.0009355155 0.4012522287 0.2011875471 -0.3383866759 0.0314800124 0.0254145347 0.0149221834 -0.0025285045 -0.0013991708 0.0019379380 -0.0001479125 0.0004716702 0.0028456864 -0.0069279424 -0.0082715241 -0.0225671280 0.1064784059 0.1276645956 0.3577585315 0.0000677217 -0.0001094430 0.0000938919 0.0014037651 -0.0015963318 -0.0006075019 -0.0012492662 0.0008683895 0.0020821979 -0.0003234752 -0.0010126088 -0.0007892850 0.0002221520 0.0003780395 0.0001071903 0.0000762015 -0.0000963284 0.0000280668 -0.0014567486 0.0010343603 0.0011762259 0.0000170850 -0.0000190671 -0.0000228592 0.0006958508 0.0001500305 -0.0003015552 -0.0003733751 0.0002190258 0.0003787055 0.0000860348 0.0005970653 0.0003445005 0.0002921133 -0.0006880014 0.0002399903 -0.0020586685 -0.0000475510 -0.0011152725 0.0181135149 -0.0133894105 -0.0102738609 0.0002478451 0.0017743575 -0.0045531485 -0.0013303709 -0.0032102226 -0.0001518487 0.0000775433 -0.0012132094 -0.0004843871 -0.0011801191 0.0002868901 -0.0001774645 0.0000480517 0.0000326407 0.0003728945 0.0013185754 -0.0033968940 0.0000137514 -0.0006853298 0.0001076652 -0.0022987576 0.0021832252 0.0014339902 -0.0001744941 0.0001201201 0.0001604165 -0.0001170252 -0.0000345932 -0.0001237901 -0.0001406724 0.0003791151 0.0003193212 0.0001452157 -0.0002355221 -0.0000365919 0.0000743382 -0.0000574454 0.0001083182 0.0002651074 0.0005306999 0.0005769295 0.0006535744 -0.0004887472 0.0010248126 0.0025776425 -0.0027157484 -0.0034421254 -0.0026956886 0.0004463819 0.0001106657 0.0002000200 0.0014500173 -0.0011056292 -0.0027511926 -0.0062380214 -0.0069779765 -0.0079495091 0.0000774079 0.0000622410 0.0002352509 -0.0000113969 0.0000869686 0.0001542815 -0.0001439666 0.0000994246 0.0000047800 -0.0004302629 -0.0001099072 -0.0008632416 0.0004840979 -0.0008862148 -0.0009908396 -0.0014244358 -0.0004995883 -0.0029097220 0.0007429237 -0.0010746956 -0.0011781237 0.0002928373 -0.0001433273 0.0000594303 0.0052786373 0.0010473404 0.0095767497 -0.0056283091 0.0098632600 0.0113559463 -0.0001014063 -0.0000125104 -0.0000456136 -0.0002355525 -0.0000446182 -0.0001730336 -0.0001158037 0.0000276457 -0.0000750937 -0.0001145963 0.0000534665 0.0000338955 0.0000330458 -0.0000608222 -0.0000279674 -0.0000650256 0.0000820505 0.0000477526 0.0001143401 0.0004855325 -0.0000110707 -0.0002407434 0.0002477718 0.0001571295 -0.0011662961 -0.0051731757 0.0001362139 0.0029130165 -0.0030133034 -0.0019508664 -0.0000059635 -0.0002754840 -0.0000207105 -0.0003208058 -0.0001273048 0.0001811502 0.0003714547 0.0025771879 0.0000073418 0.0036375408 0.0013675568 -0.0020195978 -0.0000715976 -0.0000670036 -0.0000367322 0.0000359515 0.0000397611 0.0000195832 0.0000900754 0.0003331534 0.0000220736 -0.0002709230 0.0002211303 -0.0001796664 -0.0005386472 -0.0033777589 -0.0000210843 0.0030300527 -0.0025025914 0.0019665050 -0.0000293629 -0.0003866711 -0.0000014401 -0.0002571342 -0.0001327873 -0.0001363182 0.0003712323 0.0040599326 0.0000192648 0.0031250739 0.0015989859 0.0016751526 0.0000491393 0.0002137147 -0.0003730808 -0.0018970396 -0.0009528700 0.0003122075 0.0009904653 -0.0021035855 0.0019596505 -0.0017774573 0.0025129261 0.0016487954 0.0007558224 -0.0010945362 -0.0009400801 -0.0004618807 -0.0009284932 0.0004608840 0.0053203279 0.0000694786 0.0038710146 -0.0116888276 0.0153872521 0.0091308048</array>
                     <array dataType="xsd:integer" dictRef="x:serial" size="345">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="345">-283.19604187 11.34678481 17.63135556 25.74230554 26.94974619 30.60262293 34.55982316 39.66835975 45.82309085 49.23211916 53.22857771 55.44039407 57.99678333 61.02668344 64.60248914 67.56364901 72.82047582 75.94914449 79.52208295 81.17101393 83.71495472 90.70021008 92.45814646 94.79693977 99.42249149 108.87990441 111.86155968 118.53971210 128.70643286 130.00177422 131.66556690 136.04382375 142.19929452 155.84396796 159.07005990 161.29169714 165.69963267 168.82838703 170.68919036 183.15643990 184.73694137 189.27318286 193.84897546 195.34763097 201.12279881 202.56579980 213.21868509 215.60241509 221.05471568 229.03680316 233.35701832 236.44703173 241.66803180 249.08816318 251.17205669 255.65314261 256.59488664 273.68246554 280.10304562 288.43438875 292.26886959 301.44790582 316.76943930 324.28089302 337.52088942 339.73544688 345.63773846 350.79502175 358.59890580 363.96428814 371.00756367 387.04555456 393.58967445 406.07773170 417.89120360 423.32514854 426.71159553 428.48467060 438.06870768 447.67592259 451.86059977 462.69851219 467.27569780 476.22099595 477.71844703 482.23815740 489.12699818 505.38510204 511.68327658 517.83551445 524.84789038 537.98541746 545.24758783 557.89125215 561.25369383 563.39661066 571.23235585 574.43785353 577.03728751 582.31276047 584.77272676 585.97073547 602.48293308 604.45460783 609.23591923 618.62370618 622.23327672 636.71833909 640.40939021 641.83203245 645.80474349 654.18757133 657.62879414 673.81009051 681.23315482 694.20469760 697.60004326 707.17467568 717.42610712 718.05484736 722.22257417 730.49334549 732.16268894 734.79740082 752.31112386 756.24020289 766.58482682 768.87732373 774.30744087 781.79849399 782.75162677 783.14476634 785.85885070 788.17870285 801.00280086 802.44652274 803.61619016 806.22832120 811.41059014 816.76527035 824.80728995 848.93558072 853.99470607 860.69079940 865.15510097 868.69183593 869.25626107 874.94170702 880.71036626 882.50259308 885.34834846 886.68837008 888.85776416 889.46375885 891.82109819 894.82892805 901.75647634 903.41426188 904.68422993 907.72052046 908.23028298 916.93160623 918.95153908 950.47982703 953.02833605 969.68497772 975.54818641 980.53831505 983.71894316 990.27555280 1005.60811188 1008.10994371 1010.17548491 1011.45263763 1012.44240934 1015.56732552 1016.16207246 1017.43674438 1026.41944185 1027.91664588 1028.30824852 1033.38713571 1034.85842348 1038.05471942 1039.89985207 1051.37067415 1052.03980831 1060.11167308 1065.80013237 1072.90027021 1076.31819966 1080.64361972 1086.57155313 1114.61632470 1118.34381528 1123.06986455 1130.70521336 1133.88103150 1139.20847149 1143.28446463 1155.57891250 1166.96827102 1167.08710850 1175.44485847 1176.08784551 1177.76967555 1183.93015801 1186.73330117 1190.68352325 1205.50974038 1210.44425264 1215.20238283 1218.00236291 1223.43316830 1231.51642542 1232.77149036 1254.22597691 1256.77521602 1271.83316334 1275.26498221 1291.56252667 1292.45972114 1304.12762216 1305.37606018 1307.85120252 1312.05534116 1314.00352356 1319.16993360 1320.45426254 1323.63052791 1326.79326500 1332.13277553 1339.12337534 1351.79464713 1358.47647622 1371.09221841 1376.82679658 1379.04961175 1382.28446855 1388.42863801 1398.10492088 1410.83287633 1427.05062262 1428.94600952 1431.04637884 1437.80532820 1440.74160252 1441.84283165 1445.69067443 1449.10512465 1450.69471755 1453.97420437 1459.61372107 1460.85978717 1461.13400115 1465.30401786 1466.04054241 1474.23927360 1479.87351422 1487.28306781 1490.09039567 1490.78693001 1491.10283661 1494.59402521 1495.64829016 1500.03380326 1503.70769918 1505.24533245 1514.02318329 1518.29508803 1521.96681233 1533.58870899 1534.02378787 1551.93724321 1558.99478725 1561.62206414 1571.53225156 1572.82579545 1579.27419144 1623.14773171 1655.96419444 1662.87723256 1663.51118005 1672.53258429 1673.50515371 1679.87366396 1687.43007996 1690.40857904 1697.44998977 1701.21555095 1702.24744853 1705.22570059 1710.81015089 1723.09430164 1727.39586373 1742.83435502 1743.57968679 3029.56071993 3030.92124252 3031.03766057 3039.03274790 3045.92520791 3060.32966886 3121.86276515 3128.74668672 3128.90453776 3130.24689705 3134.42261620 3134.85072937 3135.95972494 3154.31531306 3162.14803415 3163.22112370 3164.46273858 3169.26721776 3189.76657801 3190.30062701 3192.04078435 3194.01341729 3195.07926494 3195.33653686 3198.19692156 3202.14428928 3202.38727190 3202.75123847 3206.86528260 3211.56091685 3213.92490547 3216.00101065 3216.27542510 3216.66633851 3217.77778901 3219.12770178 3222.80864148 3225.91518339 3230.92889698 3233.40548668 3235.59087135 3236.87665408 3249.11416335 3249.34924717 3249.95697132 3250.79322729 3254.66449634 3263.19247000</array>
                     <array dataType="xsd:double" dictRef="cc:redmass" size="345">8.31445825 6.31232073 5.42887680 6.32144255 8.12539560 5.98104723 6.49604096 6.54247007 5.32374830 4.67053859 5.62469131 4.90540033 6.09629361 6.53730610 5.65704316 4.40739465 5.08926591 6.38900447 4.88371824 5.81413346 5.65632277 5.17579880 5.87887394 6.76944090 6.11243637 5.28301658 4.50554640 5.64684540 4.40670223 6.13784671 4.79557515 4.40980754 5.93459129 4.66415750 1.69608558 4.03945284 1.47150471 2.24810940 2.08353627 3.92374483 2.34308295 2.49993638 4.12775235 1.60233086 1.68913642 3.59879617 2.82755465 2.75467825 3.47063296 6.42789430 3.00177677 2.30529679 2.27984587 5.21284891 5.06568476 6.29824046 1.64437581 6.02004702 3.12910739 4.31664181 4.96323041 4.36004605 5.24112165 7.92728737 2.24954758 4.14088839 3.19382115 5.61506643 5.40128634 6.23038515 2.58360561 6.64930681 2.15905000 7.38380409 4.57453739 3.70715283 2.94375374 3.82603195 3.30285928 8.27653438 8.78640716 5.75991025 5.72997475 4.53711801 4.82817443 4.74994776 6.72428678 5.82474939 6.43498357 5.47792165 3.83912388 4.21146413 4.32763198 4.94286053 4.02721581 4.51321745 5.08311827 4.82977351 4.36201011 3.95240390 4.82879163 4.55469293 6.57119982 6.40985162 6.30787418 3.68192731 4.76313513 6.02345717 6.94356151 7.17860753 7.04960242 3.60320193 5.64862237 5.42828842 5.42082256 6.07643665 1.18486470 1.86886132 6.94560923 7.31073226 1.69290530 1.82449337 3.47275121 3.53671133 2.96524960 5.28728326 2.39381567 1.95441613 3.63508403 5.47318051 1.33065501 1.63058496 1.39117094 1.37010983 1.82016480 2.59889353 2.31651289 4.93060068 6.43561697 3.83349415 4.29717423 3.44273869 4.29579845 1.32201197 1.72894188 4.36744186 1.36171465 3.87624088 1.74500554 2.84432427 1.65796151 2.43372253 2.18844672 2.01464347 1.79006351 1.74235420 1.53247902 2.23605457 1.61425540 7.56109269 2.68649038 2.88586906 4.88981855 1.66917117 1.65653650 1.43396108 6.78518536 1.36843872 1.36622876 2.23490075 1.43729746 1.42497425 2.04910515 1.43549338 2.22152757 1.36624683 1.31481135 1.77471893 1.34148177 1.64210707 1.78665969 2.98003985 1.43953144 1.37405319 2.59373173 1.40079038 2.66190826 1.99533236 1.36748777 2.01259716 2.07352763 1.81684982 2.89746286 3.82318396 1.53580829 7.24228080 1.22657103 1.71206391 1.25337652 1.46839948 2.07460754 1.63962946 1.84088322 1.09855894 1.26990710 1.09240139 1.25843599 1.27426744 1.58902277 1.12242146 1.48125245 1.45344239 1.51100559 2.00557630 1.67329701 1.67392395 2.43085741 1.87951395 2.02979872 3.53498372 3.62172343 2.69151456 2.79670423 1.29109696 2.82671028 1.28165771 2.25235782 2.06169652 1.47467695 1.67487243 1.52525437 2.77866839 2.09063359 2.33895832 1.55918153 3.05427470 5.49785646 3.80498358 4.35755960 4.41120079 4.79789602 1.59359357 1.43885759 3.51860584 1.51821781 1.07771158 4.64961153 6.01299491 1.14046878 1.11597161 1.19197337 1.08421931 1.22620414 3.25709153 3.19387351 1.07243267 3.20050300 1.83579426 1.14838862 5.70761320 1.27373718 3.09422353 1.17745281 3.53508036 1.05674380 1.07042041 3.55775772 3.31967228 4.08539478 2.07825109 1.13711804 2.03094293 2.44863181 2.46775017 3.10993838 3.02618164 3.31495259 4.19767033 4.42874605 3.14435777 4.90403621 7.91410720 8.35487222 8.64513657 8.49392305 5.97271283 7.08064622 6.92887221 3.27210385 6.72032868 6.83008701 5.20387886 5.56902556 6.74481635 7.14074835 12.32302367 12.66569814 1.03853285 1.03769121 1.04494459 1.04036455 1.04421737 1.03232945 1.09550951 1.10249148 1.10293355 1.10230539 1.09704480 1.10260362 1.10203497 1.07807652 1.10931401 1.10538949 1.09997212 1.10200361 1.08779768 1.08824426 1.09147887 1.09212980 1.08746430 1.10858442 1.08609299 1.09093730 1.09134169 1.09138230 1.09197382 1.09161986 1.09196467 1.09460455 1.09693903 1.09729978 1.09163277 1.09492932 1.09932533 1.09929088 1.09603798 1.09120901 1.09481782 1.09032803 1.09518660 1.09077021 1.09683258 1.09658899 1.09470576 1.08367741</array>
                     <array dataType="xsd:double" dictRef="cc:displacement" size="121095">0.0022397809 -0.0030617121 -0.0013432166 0.0039655181 -0.0043540032 -0.0002162333 0.0014117165 -0.0036815108 -0.0014189267 -0.0006813026 -0.0013567963 -0.0004323120 0.0003507498 -0.0035844429 -0.0014272489 -0.0035822008 -0.0032060729 -0.0004357543 -0.0023768342 -0.0014200920 -0.0008777964 -0.0030784614 -0.0041208348 -0.0029968534 -0.0044458042 -0.0029675202 -0.0023948863 -0.0047176635 -0.0040128432 -0.0044392083 -0.0068133500 -0.0124389685 -0.0025052058 -0.0069079879 -0.0095130351 -0.0043478964 -0.0009442230 -0.0008678270 -0.0004768306 -0.0061108405 -0.0139255647 0.0027436565 -0.0186346761 -0.0170953722 0.0049636066 0.0770552757 -0.0299379399 0.0322800697 0.0007043908 0.0173695660 0.0052629740 0.0023247351 0.0161407967 0.0056833008 0.0173770030 -0.0101041217 -0.0081537502 -0.0029983715 0.0144512825 -0.0026395898 0.0051243508 0.0026065708 0.0094719938 0.0068835658 -0.0039088285 0.0069533624 0.0174174729 0.0142577351 0.0049460575 -0.0085413192 0.0162792817 -0.0057386553 0.0122894380 -0.0015805659 0.0112610938 0.0221127160 -0.0234077782 0.0116874271 0.0369821838 -0.0157711280 0.0240140382 0.1762192974 -0.4084519719 0.2513524903 0.0578370951 -0.0539527607 -0.0236372382 0.0504445733 -0.0773356800 0.0635139987 -0.0054863416 0.0189823443 0.0039866397 -0.0104211436 -0.0076036912 0.0350172523 0.0283744168 -0.0229117304 0.0217900449 -0.0036076966 0.0206446946 0.0059411965 -0.0183973253 0.0233945330 0.0184327348 -0.0116672055 -0.0006301558 0.0308862986 0.0208825473 -0.0298673670 0.0090129213 -0.0274799436 0.0528106871 -0.0013304923 -0.0363415238 0.0630686185 0.0196857596 -0.0124826494 0.0392782251 -0.0012180133 0.0193962641 -0.0080208212 0.0023632697 0.0069853932 0.0410491275 -0.0027538107 -0.0023825913 0.0002507438 -0.0019711394 -0.2096080677 0.4417508567 -0.2674637698 0.0029941812 0.0679084618 -0.0922664470 0.0680935480 -0.0173411576 0.0821932344 -0.0306123682 -0.0507619481 -0.0044768962 -0.0060931322 -0.0054671956 0.0025722198 -0.0154044376 0.0252925125 -0.0025756321 -0.0007305837 0.0136390677 0.0022137380 -0.0214226987 -0.0160713163 0.0096462202 0.0173932800 0.0159571882 -0.0103735338 -0.0060632940 -0.0035634451 0.0012618035 -0.0140201993 -0.0059694226 0.0094102175 0.0006491877 -0.0158443357 -0.0062483014 -0.0125572891 0.0444822921 -0.0156206375 -0.0032691128 0.0104533941 -0.0061587912 -0.0292874884 0.0281586910 0.0153912693 0.0023811056 0.0150718736 -0.0089187286 -0.0045182511 0.0054212677 0.0097534641 -0.0025208646 0.0183302100 0.0054869183 -0.0139475238 0.0114539017 -0.0157141747 -0.0050493852 0.0661522488 0.0101592878 0.0083887287 0.0205237410 0.0359610377 0.0026556277 -0.0011199864 -0.0003953854 0.0021266395 -0.0037636597 0.0012645012 0.0041158247 -0.0081642691 0.0045588881 0.0019145207 -0.0031219843 0.0035052818 0.0022586771 -0.0005959809 0.0013942549 0.0018526365 -0.0003403439 -0.0006162476 0.0070481039 -0.0119371774 0.0058388750 0.0105887746 -0.0256278840 0.0144375057 0.0014226865 -0.0032743830 0.0030479216 0.0036091350 0.0008207568 0.0016655193 0.0014561115 0.0007869997 -0.0016604441 -0.0014829048 -0.0016714654 -0.0004585501 -0.0025931526 -0.0023362925 -0.0000399409 -0.0019444592 -0.0019871779 0.0008509363 -0.0025973263 0.0004152555 -0.0000129795 -0.0012049980 0.0014160671 -0.0018402313 -0.0026827984 -0.0028477520 0.0003673949 -0.0068468000 -0.0062652741 0.0009498540 -0.0027815873 0.0028652816 -0.0005628080 -0.0059785935 0.0017272958 0.0017607139 0.0003571179 0.0045855606 -0.0042757936 0.0000574978 -0.0053643705 -0.0006760365 0.0021452410 0.0042062817 -0.0039883870 0.0032502075 0.0022356226 -0.0022013957 0.0061518579 0.0094923719 -0.0029657147 0.0008446039 -0.0018420959 -0.0003929384 -0.0004181327 -0.0013715290 -0.0001041104 0.0012890645 -0.0014426125 -0.0003190646 0.0005280653 -0.0001036557 -0.0002540354 0.0029564736 -0.0017973992 0.0003412777 0.0015007118 0.0007023912 0.0001341647 -0.0007024993 -0.0001229468 0.0000865224 -0.0005466000 0.0002573335 0.0000001527 -0.0011903271 -0.0000976919 0.0010502300 -0.0005906237 0.0006928621 0.0004333833 -0.0012414257 -0.0018752615 -0.0005642304 -0.0022032093 -0.0021151855 -0.0012002533 -0.0008471176 -0.0010815323 -0.0003945175 -0.0009775382 -0.0002707018 -0.0005159201 0.0006083491 -0.0012747561 0.0010213983 -0.0007583100 0.0003354836 -0.0001410725 -0.0025208603 -0.0010141128 -0.0011814965 -0.0018962707 -0.0003082714 -0.0009661773 -0.0034647344 -0.0010371523 -0.0013164072 -0.0023133397 0.0003855421 -0.0009733246 -0.0493379600 0.0493226300 -0.0727617527 -0.0357871466 0.0880051428 0.0404329500 -0.0815339988 -0.1823352051 -0.2970902383 0.0071706369 -0.0320825494 0.0979948990 -0.0129848369 0.0987924465 -0.0833833329 0.3012183548 0.0863076860 -0.1688954119 -0.0699105227 0.0802181371 -0.0411451898 -0.0672596743 -0.0430904173 0.0643026110 0.0094221921 -0.0042010365 0.0156909977 0.0229447517 -0.0076827106 0.0442542800 0.0216735173 -0.0072890171 0.0416531536 0.0143980207 -0.0046877795 0.0323339647 0.0050986852 -0.0032786305 0.0125374994 0.0134508733 -0.0142734760 -0.0128281714 0.0073274698 -0.0028293470 0.0182111935 -0.0062024331 0.0006037125 -0.0220776654 0.0049786947 -0.0120659071 -0.0329405709 -0.0109446360 0.0021205978 -0.0375345564 0.0267307961 -0.0285201617 -0.0253784487 -0.0091429236 -0.0023923405 -0.0125022729 0.0093804139 -0.0137950834 -0.0381563078 0.0007668697 -0.0022133121 -0.0626590335 0.0213287726 -0.0229132997 -0.0384073130 0.0025415718 0.0133130606 -0.0252940435 -0.1041861959 0.1112262432 -0.0797428268 -0.0823094473 0.0927165009 -0.0670860297 -0.0281630174 0.0462859662 -0.0349910534 -0.0800091683 0.0909712221 -0.0666590799 -0.0562080117 0.0705339677 -0.0520115417 -0.0295143014 0.0476045658 -0.0362006608 -0.0530182149 0.0673781138 -0.0506647009 -0.0996822181 0.1075694452 -0.0785236535 -0.0570232912 0.0712410043 -0.0531651376 -0.0100274557 0.0316005941 -0.0260921211 -0.0059111891 0.0273178904 -0.0201103179 0.0039255326 0.0257779020 -0.0000140719 -0.0024445179 0.0332261288 0.0049887832 0.0253167594 0.0055197974 0.0058974025 0.0624532384 -0.0291581049 0.0148561031 0.0398238898 -0.0090033958 0.0147536599 0.0295224543 0.0029409785 0.0018178610 0.0478398276 -0.0143710655 0.0061274444 0.0582871167 -0.0264308130 0.0190693020 0.0364515866 -0.0067885915 0.0175953473 0.0175398396 0.0169682049 -0.0040325261 0.0507547957 -0.0163711708 0.0032546343 0.0694730607 -0.0379805341 0.0250082910 0.0770473401 -0.0425256984 0.0179581326 -0.0549518618 0.0694513389 -0.0486082569 -0.0264621688 0.0386691045 -0.0464535719 0.0047492107 -0.0242191093 -0.0591721766 -0.0026071300 0.0427268492 0.0367501370 0.0026539136 0.0207040760 0.0525352600 0.0057608721 0.0039529559 0.0686467931 -0.0074402300 0.0063884632 0.0863340836 -0.1052712682 0.0367762222 0.1100927073 0.0305237892 0.0190934830 0.0007493118 0.0444428239 -0.0412674152 0.1723547170 0.0059366641 0.0129570106 0.0495738827 0.0112007240 -0.0103790657 0.0628813713 -0.1679018067 0.0152681796 0.0483058228 -0.0569034214 0.0335406057 0.1182634016 -0.1479956831 0.0790944560 0.1790705616 0.0120768849 0.0305902925 -0.0404600701 0.0884449067 0.0128640484 0.0003013521 0.0189791484 0.0224988036 -0.0087490772 0.0407985533 -0.0438669207 0.1879484180 0.0211677008 -0.0451408931 0.2269174545 0.1040842015 -0.0681098098 0.1581860237 0.0044254174 -0.0095920489 0.0829706942 0.0183881348 -0.0237488001 0.0573592720 0.0146228786 -0.0149386316 0.0577119615 0.0018869963 -0.0028017320 -0.0058574457 0.0063420161 0.0132740761 -0.0255633567 0.0025577905 0.0111962304 -0.0417105795 -0.0036202192 -0.0097617887 -0.0365205300 -0.0093235512 -0.0232134080 -0.0193962345 -0.0068207656 -0.0178162439 -0.0051907368 0.0145535739 0.0274939316 -0.0265809638 0.0052138517 0.0240769981 -0.0562015933 -0.0038031291 -0.0197703167 -0.0475461571 -0.0154085668 -0.0380971424 -0.0170678566 -0.0103640295 -0.0273445293 0.0076309150 0.0047939643 0.0045704068 -0.0864769449 -0.0011646406 -0.0112597214 -0.1038067296 -0.0096492228 -0.0584356165 -0.0926698734 -0.0090945077 -0.0862870259 -0.0676519792 -0.0005190534 -0.0666886380 -0.0520578837 0.0086120510 0.0393078349 -0.0915830260 -0.0010151620 0.0106375007 -0.1240347917 -0.0199538666 -0.0804387719 -0.1050357776 -0.0157017351 -0.1237663862 -0.0599985830 -0.0002268823 -0.0877152199 -0.0318623217 -0.0076492995 -0.0422209553 -0.0476164943 -0.0002649928 -0.0054426992 -0.0552799987 -0.0496342794 -0.1524000483 -0.0926198829 0.0024593971 -0.0243326986 -0.1257890592 0.0336888017 -0.0095581401 0.0661121536 0.0306012434 -0.0087805756 0.0609396179 0.0497744196 -0.0131731984 0.0957865301 0.0633906706 -0.0164733947 0.1191615146 0.0515998455 -0.0135212204 0.0999704873 0.0761387335 -0.0193681760 0.1423597163 0.0450096680 -0.0125770583 0.0840025370 0.0610492562 -0.0162309412 0.1127643183 0.0439012086 -0.0126501908 0.0786443678 0.0722343882 -0.0189001173 0.1307368434 -0.0070621737 0.0116219071 0.0309584801 -0.0128749938 0.0127252640 0.0101776978 -0.0164326894 0.0256362463 0.0624614384 -0.0299905381 0.0392822082 0.0740435405 -0.0128801934 0.0255369368 0.0764557315 -0.0369126249 0.0500236175 0.0984002536 -0.0264711616 0.0267875518 0.0226792455 -0.0349775608 0.0397508897 0.0542509280 -0.0303739905 0.0272457586 0.0066307640 -0.0456038297 0.0505882154 0.0637096024 -0.0098382272 0.0652164141 0.0271219490 -0.0033876163 0.0529329719 0.0207377517 -0.0206414950 0.0801824322 0.0478631804 -0.0112373593 0.0812797779 0.0056957279 -0.0060674540 0.0515496297 0.0409086034 -0.0107200154 0.0600435680 0.0498807076 -0.0041285685 0.0431699304 0.0442044771 -0.0059089707 0.0578327507 0.0293613733 -0.0288291790 0.0116090018 -0.0371519297 -0.0203221837 0.0136350686 -0.0346494560 -0.0220791032 0.0138832135 -0.0301083117 -0.0214067163 0.0121716916 -0.0078628778 -0.0306468599 0.0116638969 -0.0298601868 -0.0050484315 0.0178163029 -0.0029715391 -0.0180997636 0.0106212748 0.0096488460 -0.0167303345 0.0068280584 0.0507646554 -0.0053087235 0.0164187948 0.0176543735 -0.0169160678 0.0056586552 0.0676018908 0.0064460185 0.0234376762 -0.0323009550 -0.0388011006 0.0112437987 -0.0428570339 -0.0136975696 0.0223116580 -0.0571753605 -0.0167360292 0.0252605169 -0.0636746909 -0.0077423403 0.0292161894 -0.0705445670 0.0045315720 0.0006620988 -0.0267000872 -0.0801345255 -0.0390045192 0.0162342713 -0.0630699192 -0.0332237955 0.0122454549 -0.0199768042 -0.0180716214 0.0014576649 -0.0655451509 -0.0290480306 -0.0137597913 -0.0389373050 -0.0299133263 0.0330488151 -0.0175360248 -0.0223026105 0.0269964003 -0.0437716003 -0.0213377258 -0.0197336728 -0.0840878148 -0.0313704482 -0.0303311256 -0.0365488757 -0.0330277398 0.0536784891 0.0021787235 -0.0204175392 0.0423018870 0.0009894469 -0.0113427666 -0.0019815430 0.0127807240 -0.0209658443 0.0245626925 0.0102332584 -0.0285731546 0.0478315642 0.0433725069 -0.0126643328 0.0208186948 0.1228247656 -0.0195023471 0.0212523733 0.0871100701 -0.0424429769 0.0554837480 0.0366652079 0.0158672422 -0.0141068527 0.0767704377 0.0127821591 -0.0140966977 0.1275285614 -0.0461892136 0.0561018008 0.0912811019 -0.0622926644 0.0820813321 0.0003445918 0.0400913866 -0.0420115702 0.0713425689 0.0355084230 -0.0428390477 0.1630506825 -0.0695642920 0.0827683711 0.1543116478 -0.0221056525 0.0213559263 -0.0470520897 -0.0194141579 -0.0462440972 -0.0353117625 -0.0020334313 -0.0565773748 0.0050118498 0.0263185709 0.0074712290 -0.0368929797 -0.0304078016 0.0183373300 0.0087495227 -0.0116094940 0.0440128781 0.0447060380 0.0143545837 0.0035876413 0.0416217801 0.0193794405 -0.0592929051 0.1039947751 -0.0374492732 -0.0904592125 0.0176789125 0.0262904506 -0.0089215392 0.0065855214 0.0825621514 -0.1358570870 0.0211511495 -0.0141512575 0.1152437123 0.0775334577 -0.0029216063 0.1524885839 0.1572336372 -0.0183017794 -0.0379133507 0.0491882471 -0.0328599863 -0.1136770863 0.1412222770 -0.0927926976 -0.1398232702 0.0263524592 0.0135192838 0.0181446707 -0.0151312284 0.0414693576 -0.0046866440 0.0231859573 0.0245216743 -0.0159879625 0.0098072275 0.0907066741 -0.1758431785 0.0226152830 0.0748336646 -0.1734516191 -0.0353098001 0.1278809428 -0.1104056213 0.0686998081 -0.0048567810 0.1582173781 0.1274686810 0.0071777772 0.1254997425 0.0779854775 -0.0044256734 0.2061185958 -0.0264005871 0.0035563233 -0.0383426847 -0.0171905290 -0.0133112758 -0.0300541880 -0.0072724215 -0.0363930066 -0.0189731496 -0.0064051290 -0.0423417705 -0.0163990698 -0.0167822377 -0.0219046543 -0.0265731926 -0.0274924692 0.0017396952 -0.0380258752 -0.0173653226 -0.0119415938 -0.0305619864 -0.0000284184 -0.0514430084 -0.0116363426 0.0049676889 -0.0715648781 -0.0019609746 -0.0161618951 -0.0259102943 -0.0247768513 -0.0356524327 0.0161450433 -0.0452591899 -0.0053543727 0.0171768270 0.0108168041 0.0031449641 0.0270269075 0.0018161886 0.0220219628 0.0467270499 -0.0108313123 0.0338507776 0.0576505458 -0.0144133544 0.0249734928 0.0468985056 -0.0051563539 -0.0210394311 0.0015386926 0.0200921816 -0.0050221216 0.0195898153 0.0040771930 0.0288166644 0.0552641528 -0.0200184077 0.0494312280 0.0739531121 -0.0246818769 0.0333697092 0.0549297231 -0.0084097164 0.0185008738 -0.0868261062 0.0023816119 -0.0007443602 -0.0782342594 0.0049629802 0.0515427519 0.0814484240 -0.0291305812 0.0106090720 0.0342588925 -0.0178983537 -0.0147585866 0.0156845816 -0.0124792242 -0.0124155699 0.0150389734 0.0016091375 -0.0067119608 0.0183634948 -0.0045236128 0.0041264133 0.0207643785 0.0176231699 -0.0086930658 0.0186153124 -0.0160030948 0.0104589687 0.0228585737 0.0237056712 -0.0001345926 0.0178943507 0.0253388299 0.0079705174 0.0204897984 0.0330222740 0.0026491912 0.0179352036 0.0376475645 0.0175847311 0.0222313666 0.0512303011 -0.0321109777 -0.0002437201 0.0439587742 -0.0305134796 -0.0010621106 0.0653788737 -0.0499584730 -0.0103011631 0.0592455198 -0.0646788935 -0.0195890914 0.0954789838 -0.0522685692 -0.0104217295 0.0431645889 -0.0785453272 -0.0270322199 0.1071276150 -0.0453957299 -0.0106490471 0.1025435508 -0.0622067954 -0.0196985237 0.1178692241 -0.0437873125 -0.0108956673 0.1191636320 -0.0738950594 -0.0271650189 0.1469053567 -0.0859355570 -0.0579836607 0.0641950714 -0.0800054105 -0.0396464701 0.1151190252 -0.1064281961 -0.0757254228 0.0566240149 -0.1121470693 -0.0801887266 0.0557140891 -0.0501803143 -0.0409555769 -0.0496534921 -0.0795997764 -0.0648432094 -0.0660362126 -0.0181809623 -0.0154107272 -0.0814638618 -0.0633355325 -0.0513019868 -0.0544274301 -0.0352588695 0.0292312284 -0.0126508662 -0.0601002596 0.0147725914 0.0070601685 -0.0455186663 0.0117212711 -0.0016677360 -0.0020648527 0.0012871999 -0.0130640744 -0.0153351398 0.0242661383 -0.0209634391 0.0447992169 0.0144834976 -0.0164469367 0.0256508337 -0.0034447271 -0.0109452205 0.0637257980 -0.0067883557 0.0120740887 0.0622283704 0.0125188939 -0.0026743027 0.0749054918 -0.0088135289 0.0266854432 0.0423249954 0.0342728305 -0.0304237282 -0.0057675996 0.0405777020 -0.0327384034 0.0209655868 0.0613746800 -0.0416375569 0.0376136128 0.0745940030 -0.0461478968 0.0064259623 0.0779351088 -0.0485384892 0.0207038737 0.0562594066 -0.0343204638 0.0617465485 -0.0052719970 0.0093232722 0.0537382896 0.0032928318 0.0034627045 0.0329148873 0.0235776473 -0.0115199357 0.0268257853 0.0271895794 -0.0146319076 0.0700605509 -0.0088719053 0.0134791747 0.0590847638 0.0021014794 0.0060359912 0.0155800196 0.0383496525 -0.0224832500 0.0130763192 0.0377079449 -0.0232354541 0.0907264862 -0.0260306250 0.0265365883 0.0699092403 -0.0049358801 0.0125628666 0.0257323144 0.0332173734 -0.0192253443 0.0261377973 0.0077164634 -0.0030464839 0.0352433849 -0.0227409531 0.0273290801 0.0507755049 0.0411821446 -0.0142749835 0.1216590298 0.1019623276 -0.0310719382 0.0826830080 0.0463597416 0.0249546046 0.0517453453 0.0681143731 -0.0623806199 0.0893880059 0.0969711080 -0.0708308812 0.1178834434 0.0778036542 0.0165620633 0.0820595088 0.0253372030 0.0635449949 0.0253140618 0.0638891778 -0.0957197612 0.0925176755 0.1158776550 -0.1115770084 0.1432535056 0.0820290924 0.0479845910 0.1496198965 0.1247689832 -0.0372887002 -0.0138005798 0.0624262224 -0.0394870427 -0.0053425935 0.0704144174 -0.0450599742 0.0630722042 0.0185099100 0.0066920478 -0.0509513208 -0.0308804924 -0.0228235248 -0.0614750820 -0.0545210185 -0.0195680292 -0.0906233301 -0.0379167763 -0.0254674322 -0.1024545660 -0.0364299520 -0.0060993787 -0.1409155417 -0.0023436208 0.0130797168 -0.0866951520 -0.0253319010 -0.0406865441 -0.0862402144 -0.0815770469 0.0391863013 -0.0393567642 -0.0987146327 -0.0074573999 -0.0511631620 -0.1180652113 -0.0086179804 -0.1762079990 -0.0175910523 -0.0203115223 -0.0946968143 -0.0059032679 0.0311622106 -0.1669321430 0.0421353979 0.0445266549 -0.0810753658 0.0145498125 -0.0773703512 -0.0561295093 -0.0654510575 -0.0532981427 -0.1124983241 -0.0178398055 -0.0089194963 -0.1055929304 -0.0793432422 0.0500842356 -0.0976443345 -0.0999593113 0.0660691184 -0.0473004708 -0.0985782354 0.0302408169 -0.0859117916 -0.1289858520 -0.0146752416 -0.0457170224 -0.0933966993 -0.0090160827 -0.0296941813 -0.1474006385 -0.0022174469 -0.0378560625 0.0442522263 -0.0060473431 -0.0362802822 0.0233052326 0.0132120857 -0.0303101348 0.0179649204 0.0283318077 -0.0270203717 0.0346487444 0.0234399018 -0.0300601032 0.0593029260 0.0033478098 -0.0361008789 0.0646464730 -0.0117898335 -0.0392022579 0.0071039122 0.0171457467 -0.0273137651 -0.0014410614 0.0437896037 -0.0209988925 0.0268149327 0.0374521548 -0.0274374173 0.0733882945 -0.0002458070 -0.0383254145 0.0821284765 -0.0272736679 0.0301020440 -0.0310435004 0.0356444582 0.0090873552 -0.0571006559 0.0542042636 0.0218626328 -0.0342250304 0.0441296618 0.0589703976 0.0213575431 0.0137992531 0.0814261497 0.0495774029 -0.0059765805 0.0175599482 -0.0562823995 0.0442526285 -0.0186710571 -0.0992844109 0.0773233082 -0.0063868441 -0.0748759855 0.0640507425 0.0674697662 0.0390578418 0.0074092988 0.1094967874 0.0900045970 -0.0297265640 -0.0121143269 0.0324636665 0.0396187755 -0.0266132431 0.0162062276 0.0453323017 -0.0246515336 -0.0909879888 0.0711653665 -0.0097577988 -0.0893449614 0.0707576775 -0.0360993761 -0.0114178909 0.0018721218 -0.0131106951 -0.0168019455 -0.0024858558 -0.0476402941 -0.0296759456 0.0126139341 -0.0359789563 -0.0520343420 0.0188580013 -0.0658807846 -0.0253434250 0.0160689470 -0.0447229937 -0.0656759525 0.0270487993 -0.0008834228 -0.0400214771 0.0045789854 -0.0121319373 -0.0571391602 0.0149802485 0.0177269669 -0.0441813758 0.0020623445 -0.0023169943 -0.0748460161 0.0202873128 0.0288532824 -0.0241609450 0.0020326334 0.0490383049 -0.0261564213 0.0125638936 0.0112262578 -0.0428439613 0.0064016896 0.0147772201 -0.0630394923 0.0197095774 -0.0052792883 -0.0411988434 -0.0002383494 0.0009078922 -0.0773085788 0.0226196193 0.0523385720 -0.0475585492 0.0264977105 0.0357267981 -0.0655017818 0.0297225824 0.0684638660 -0.0490942552 0.0348021217 0.0382636238 -0.0813466023 0.0402276004 -0.0340991905 -0.0703229692 -0.0086743657 0.0032489328 -0.1139423110 0.0072020992 -0.0850856873 -0.0927345551 -0.0052686329 -0.0091946799 -0.0351464570 -0.0179020402 -0.0790786305 0.0110049064 -0.0406958370 -0.1090734005 -0.0115083923 -0.0560994850 -0.0975337776 0.0477031708 -0.0517637687 -0.0511597136 0.0297319411 -0.0253117296 -0.0068891495 -0.0119595741 -0.0261740213 -0.0321378104 0.0086422683 -0.1272371495 -0.0242686987 0.0056451892 -0.0851424575 -0.0019050565 -0.0042283606 0.0188428573 0.0058135281 -0.0163353906 0.0248381864 -0.0021840437 0.0004472114 0.0675079048 0.0005291094 -0.0058899555 0.0488431331 0.0095182365 -0.0060264618 0.0629220332 0.0093285844 0.0000081359 0.0580949089 0.0173028508 -0.0065943561 0.0610922543 -0.0178592121 0.0068699381 0.0935766606 0.0254039405 -0.0277352595 0.0761869241 0.0064484338 0.0194304498 0.1305566540 0.0593320513 0.0186120837 0.1783727781 -0.0462541283 0.0597853198 0.1310071016 -0.0153521228 0.0228728133 0.0632129526 0.1263370722 0.0773909845 0.0016923752 0.0966842697 0.0654458969 0.0099056650 0.0224452547 0.0343255991 0.0331717238 0.1000588588 0.0579094549 0.0574932999 0.0543669326 0.0581099321 -0.0265601437 0.0176771989 0.0421425840 -0.0148031885 0.0629041202 0.0427535744 0.0697696803 0.1323691978 0.0643352677 0.0871066430 0.0498311910 0.0639389084 -0.0636156371 -0.0152713754 0.0334384963 -0.0423654046 -0.0052187355 0.0156002874 0.0444491935 -0.0134412253 0.0043147013 0.0369549909 -0.0069406665 -0.0095762010 0.0436866625 -0.0090986044 0.0125222899 0.0353823023 0.0219141201 0.0259003080 0.0313748796 0.0136380881 -0.0025114002 0.0530391711 -0.0171695132 0.0343671403 0.0158794090 0.0000054110 0.0404569503 0.0137365964 0.0289827098 0.0053621560 0.0512107265 0.0209920933 -0.0201206190 0.0690544806 -0.0342686460 0.0400335651 -0.0001142328 -0.0035125814 0.0548231423 -0.0041655165 0.0469215252 -0.0054877169 0.0653299689 0.0340747144 0.0305580703 0.0300130332 0.0719133920 0.0356633727 0.1126346651 0.0307988966 0.0388965838 0.1248218859 0.0212166022 -0.0036119745 0.0137697227 -0.0369944647 -0.0217089306 0.0252112677 -0.0294623897 -0.0101486809 0.0264794547 -0.0290162161 0.0123773893 0.0028635123 -0.0261516941 0.0142753049 -0.0351325366 -0.0549870230 -0.0079210703 -0.0413096105 -0.0120614823 0.0278317626 -0.0669752433 -0.0042956354 0.0304313118 -0.0216877217 -0.0195478166 -0.0200631662 0.0541263539 -0.0043474480 -0.0160486652 0.0642623258 -0.0770760756 -0.0293404004 -0.0562985701 -0.0320351909 -0.0082184979 -0.0562479774 -0.0706150623 0.0045445644 -0.0141928757 -0.0160372079 0.0260553255 -0.0697878757 0.0103104536 0.0398551696 -0.0625685485 -0.0154312349 0.0287507023 -0.0848422875 -0.0050806178 0.0360308001 -0.0462502689 -0.0131348154 0.0169775885 -0.0008786822 0.0179946472 0.0477450346 -0.0109605752 -0.0125660269 -0.0189016844 0.0614203675 0.0126763414 -0.0060692489 0.0557663304 -0.0004233805 -0.0216364853 0.0840302119 -0.0041400569 -0.0219454118 -0.0268720905 -0.0015163576 -0.0181330571 -0.0338004679 -0.0018387440 -0.0223788925 -0.0403447808 -0.0082416555 -0.0269872552 -0.0415336569 -0.0114700413 -0.0322112001 -0.0339630552 -0.0087899537 -0.0323953964 -0.0249300934 -0.0005690070 -0.0112004849 -0.0355810113 0.0015246149 -0.0195555788 -0.0458831289 -0.0113692922 -0.0243587776 -0.0524735216 -0.0152480984 -0.0362077208 -0.0342320842 -0.0120776904 -0.0383466855 -0.0167227076 -0.0117922186 0.0187819316 -0.0265526760 -0.0107106114 0.0022543346 -0.0819879132 0.0237456873 -0.0402668983 -0.0941985490 0.0605563329 -0.0611456063 -0.0568563344 0.0603887979 -0.0397727710 -0.0035384819 -0.0420643594 0.0485663063 -0.0141497539 -0.0385070418 0.0192932837 -0.1134613525 0.0171195450 -0.0700280493 -0.1472904381 0.0878965425 -0.0953196369 -0.0679904890 0.0886859798 -0.0568329102 0.0271051785 -0.0186508641 -0.0321116050 -0.0541128116 -0.0075585783 -0.0133339864 -0.0595666617 0.0255263646 -0.1435490641 -0.1497685544 0.0031933115 -0.0203410192 -0.1851565699 -0.0348002919 0.0201605587 -0.0965101433 -0.0223763076 0.0173011981 -0.0403542172 -0.0613843088 0.0410410142 -0.1683983456 -0.0763550690 0.0601552733 -0.1831072161 -0.0709368628 0.0424248548 -0.2134956254 -0.0982295208 0.0765565161 -0.2405545640 -0.0362580748 0.0387052738 -0.0514974609 -0.0630423653 0.0593013208 -0.1221352503 -0.0272800398 0.0389309842 -0.0060748730 -0.0745235655 0.0754021654 -0.1315020179 0.0071251418 -0.0138857783 0.0422489892 0.0058033673 -0.0138542214 0.0604646772 0.0141926450 -0.0241028312 0.0182358733 0.0170290738 -0.0324195521 0.0212294629 0.0163928066 -0.0251558786 -0.0032383839 0.0229064189 -0.0392414747 0.0034947824 0.0080117126 -0.0230387613 0.0648412496 0.0122402409 -0.0316750023 0.0466698483 0.0076100775 -0.0230952183 0.0819133025 0.0136502165 -0.0378970072 0.0500307645 -0.0478382945 -0.0410466049 0.0427999733 -0.0323749504 -0.0518654992 0.0634547713 -0.0734520568 -0.0523137907 0.0445317091 -0.0475919450 -0.0340551308 0.0347029934 -0.0494331319 -0.0124314881 -0.0019889775 -0.0646654966 -0.0370944141 -0.0222583503 -0.0564938751 0.0196208597 -0.0167121827 -0.0360341681 -0.0101037126 0.0179352572 0.0085157500 -0.0047825440 -0.0601100924 -0.0007020315 0.0067895456 -0.1113642245 -0.0001241083 0.0061549804 -0.0924982823 0.0062483502 0.0021734200 -0.0362004969 0.0064915334 -0.0050430761 -0.0455956339 0.0082111094 0.0055274183 -0.0054887431 0.0021422677 0.0007949741 -0.0034443023 -0.0286970241 -0.0042844248 0.0911303391 -0.0050458253 0.0035534012 0.0340005760 -0.0400946794 -0.0057638207 0.1272009866 0.0221160096 0.0066691055 -0.0360351284 0.0024688000 -0.0081436126 -0.0464131155 0.0110308204 -0.0115407945 -0.0579967659 -0.0079511898 -0.0192429926 -0.0631616619 0.0300855708 -0.0177747215 -0.0677371456 0.0133296042 -0.0041487362 -0.0209152066 -0.0418586337 -0.1235957340 0.0785622955 -0.0330370614 -0.0966044245 0.0600668512 -0.0079203181 -0.0295953411 0.0122958204 -0.0310310470 -0.0942646763 0.0197697217 -0.0240114629 -0.0638408666 0.0764194557 -0.0116005028 -0.0302383821 0.0525451612 -0.0192687850 -0.0601782403 -0.0052228999 -0.0389472387 -0.1191055329 0.0055104848 -0.0259214930 -0.0642528772 0.1081354910 -0.0026699741 -0.0049715609 0.0666012521 0.0072894044 -0.0009310599 -0.0075194627 0.0114145243 0.0149800171 -0.0095084640 0.0067985688 0.0248866805 -0.0144083073 0.0031030939 0.0146591577 -0.0097540503 -0.0365125346 0.0240664859 -0.0115089255 -0.0276154368 0.0445121761 -0.0288034311 0.0160050943 -0.0121723998 0.0086663908 -0.0048617113 -0.0072246504 0.0080166918 -0.0477540694 0.0488727596 -0.0300194113 -0.0377003473 0.0643045010 -0.0430792799 0.0403450068 -0.0314246528 0.0251507266 0.0037588193 -0.0269000070 0.0240838975 -0.0726705295 0.0720630001 -0.0447556251 -0.0523013856 0.0280060354 -0.0122405863 -0.0202409729 -0.0599675696 -0.0432770485 -0.0043611297 -0.0414518296 -0.0554247575 0.0028201402 0.0051171013 0.0144367753 0.0435986183 0.0272355413 -0.0104288455 0.0225529397 0.0177384686 -0.0229894996 0.0108926101 -0.0045913539 0.0047739197 0.0054584228 -0.0068185958 0.0497332180 -0.0440571215 0.0339355604 0.0726270537 0.0249219585 -0.0053116655 0.0065092602 0.0335512278 -0.0561524569 0.1109062606 0.0103920884 0.0280974143 -0.0657403747 -0.0207831628 0.0278756845 -0.0891766642 -0.0858621441 0.0148588142 0.0330802927 0.0007487047 0.0304996051 0.0873408725 -0.0731922822 0.0773536383 0.1112493503 0.0154833508 0.0007978636 -0.0148547381 0.0535994932 -0.0090360992 0.0060367291 0.0188723068 -0.0034533092 0.0029591238 0.0331593502 -0.0634707049 0.1442021014 0.0205575738 -0.0469476760 0.1413795018 0.0661146506 -0.0933592077 0.0899975280 -0.0114613416 0.0298350354 -0.0957762638 -0.0511615519 0.0227315858 -0.0726359548 -0.0240286010 0.0327355780 -0.1189303235 0.0198193964 -0.0052986657 -0.0280157863 -0.0094326153 -0.0023057621 -0.0036455808 -0.0049898404 0.0135945333 0.0324856383 0.0289320634 0.0288173165 0.0416144728 0.0618849496 0.0211920634 0.0209167621 0.0574958684 0.0016080373 -0.0127877497 -0.0386878843 -0.0111056304 -0.0132367101 -0.0275165106 0.0150042225 0.0517453224 0.0303026546 0.0562329857 0.0758182270 0.0898102680 0.0311022258 0.0305948949 0.0828328224 -0.0043499474 -0.0289017144 -0.0168605481 0.0035113912 0.0053997057 -0.0150252810 -0.0009704507 -0.0146865644 0.0041380742 -0.0065530107 -0.0239783555 0.0254958196 -0.0028616882 -0.0161464212 0.0260292735 0.0052989522 0.0019260377 -0.0356046884 0.0047346170 0.0146660593 -0.0302795953 -0.0022344158 -0.0222319436 -0.0002403056 -0.0200405408 -0.0406131670 0.0405846469 -0.0072906110 -0.0238305268 0.0427125315 0.0088147762 0.0074149789 0.0547221684 0.0838236457 0.0813767292 0.0075394994 0.0503436781 0.0968688589 -0.0052370613 -0.0556646529 -0.0382255920 0.0009821839 0.0046644894 -0.0547008317 -0.0055017245 0.0174200436 -0.0973198130 0.0034903415 0.0155549919 -0.0567325341 -0.0160038993 0.0326824197 -0.1363388000 -0.0172945978 0.0463532645 -0.1295719234 -0.0224450914 0.0335210488 -0.1718293476 -0.0265924001 0.0576890397 -0.1607400576 0.0060035944 0.0308728034 -0.0420185310 -0.0040758219 0.0452201458 -0.0789295086 0.0139303037 0.0314047735 -0.0013921635 -0.0022972671 0.0555003443 -0.0687793095 -0.0222910863 -0.0107982330 0.0481721360 -0.0407323684 -0.0104770604 0.1053161898 -0.0363843898 -0.0245064446 0.0529809649 -0.0695551068 -0.0334831796 0.1229191854 -0.0224759724 -0.0273165488 0.0033559534 -0.0806627106 -0.0428778251 0.1278540994 -0.0740408419 -0.0198027446 0.1770742700 -0.0898646000 -0.0305883062 0.1886360717 -0.0878595980 -0.0187919624 0.2243238983 -0.1169637546 -0.0375508875 0.2460267954 0.0691988495 0.0423157901 -0.0341104972 0.0566312668 0.0449689224 -0.0626841138 0.0942544772 0.0512326719 -0.0378484366 0.0791319669 0.0422541183 -0.0206451633 0.0555392323 0.0242419919 0.0268725401 0.0741137824 0.0473672184 0.0447996653 0.0500619283 -0.0040866049 0.0458637069 0.0503588750 0.0251378939 0.0157060270 0.0769766971 -0.0440142040 -0.0138838445 0.0987487875 -0.0339761983 -0.0233317078 0.0866745011 -0.0313274857 -0.0177526654 0.0508994360 -0.0212123993 -0.0100040046 0.0584829096 -0.0393389932 -0.0104027661 0.0085459985 -0.0316879227 0.0073174473 0.0263145463 -0.0176018218 -0.0018854396 -0.0335498669 -0.0153633651 0.0375953579 -0.0211197299 -0.0313701282 0.0275487367 -0.0567897260 -0.0143061376 0.0529100523 0.0160831292 -0.0481199856 0.0060759294 0.0490307869 -0.0557858926 -0.0009138671 0.0280837454 -0.0516007026 0.0209234847 0.0474627821 -0.0520287796 0.0396406270 0.0055825672 -0.0428064537 0.0308289836 -0.0303630816 -0.0329868754 0.0259180954 -0.1952025375 0.1108174976 -0.0614489471 -0.1563345692 0.0772867200 -0.0385353726 -0.0629253167 -0.0018538840 0.0165129857 -0.1167316851 0.0424235012 -0.0154367301 -0.1456875523 0.0679480761 -0.0323502001 -0.0986124314 0.0276053716 -0.0051380435 -0.0683321756 0.0013117000 0.0130800810 -0.1229326460 0.0475574103 -0.0192194926 -0.1752216149 0.0924191162 -0.0501308718 -0.0941454821 0.0224090321 -0.0039563799 -0.0366073914 -0.0213248025 0.0318337013 -0.0289353490 -0.0030742699 0.0371620903 -0.0361080134 -0.0036915629 0.0619255245 -0.0043494661 0.0353415423 0.0244030670 0.0457057880 0.1438105815 -0.0045054816 -0.0094571983 0.0997522317 0.0528858759 0.0263998724 0.0228848688 -0.0179451528 0.0542417427 0.0750725600 -0.0321832293 0.0141221700 0.1567301580 0.0378156453 -0.0323383420 0.1064551895 0.0881667984 0.0305476257 -0.0262529334 -0.0428100183 0.0801096575 0.0637124526 -0.0696082334 0.0072743654 0.2099249954 0.0615512506 0.0634762995 0.1864373586 -0.0154952282 -0.0322824899 -0.0284661769 0.0328823260 -0.0224025329 -0.0455542788 0.0361445638 -0.0332364551 -0.0442962003 0.0372090131 -0.0388701281 -0.0337130838 0.0022438750 -0.0432565773 -0.0174875537 -0.0091052094 -0.0531628602 0.0012053148 -0.0249764339 -0.0218894952 -0.0046927717 -0.0681871920 0.0053281385 -0.0443398346 -0.0883266721 -0.0316102651 -0.0270435164 -0.0428720503 -0.0241157426 0.0521282525 -0.1065480343 -0.0418944362 -0.0184937387 -0.0040968269 -0.0551378940 0.0100447636 -0.0251885321 0.0316407074 -0.0327880264 -0.0631071367 -0.0298146778 -0.0414761499 -0.1063990849 0.0238920685 -0.0814178044 -0.1076547214 -0.0269488916 -0.0231658372 -0.0397347034 -0.0533192606 -0.0464673157 -0.0499420481 -0.0246183257 -0.0295329285 -0.0190366530 -0.0146745811 0.0581680395 -0.1443548039 -0.0191756012 0.0468641441 -0.1182056718 -0.0415317153 0.0886391009 -0.0856291057 -0.0485203585 0.0081222562 -0.0537736226 -0.0681802516 0.0305464100 -0.0156443839 -0.0575437588 0.0132833225 -0.0222634313 0.0771678713 -0.0434829520 -0.0132374815 0.0566594663 -0.0141804637 -0.0231226878 0.0417156627 0.0246495774 -0.0323264748 0.0494727473 0.0342811585 -0.0320457134 0.0732906776 -0.0017609629 -0.0188676935 0.0887103328 -0.0438624170 -0.0080600976 0.0513701587 -0.0160111135 -0.0248707441 0.0229519641 0.0526695830 -0.0415753118 0.0321801616 0.0897341734 -0.0439990902 0.0792028058 0.0054425642 -0.0186284803 0.1075248318 -0.0698333328 0.0012082566 -0.0391762051 -0.0555657543 0.0449867208 -0.0385720845 -0.0540760099 0.0481161577 -0.0330915214 -0.0412411411 0.0433356591 -0.0309884467 -0.0345653542 0.0384722676 -0.0317725482 -0.0371316192 0.0357928027 -0.0421565831 -0.0638598862 0.0471620437 -0.0405094333 -0.0603126348 0.0528230935 -0.0265279582 -0.0315800221 0.0417140736 -0.0269398711 -0.0254489149 0.0352505865 -0.0289878908 -0.0301836403 0.0306960533 0.0190132462 0.1207679687 -0.0489685200 0.0313962132 0.1028335848 -0.0477633441 -0.0053171243 0.0032816980 0.0330005725 -0.0432759966 -0.0578294488 0.0481817761 0.0833750048 -0.0128111852 -0.0127308501 0.0649482915 -0.0081430155 -0.0087750951 0.1003385698 0.0012897621 -0.0092831847 0.0987999278 0.0182655241 -0.0004717138 0.1155101489 -0.0023419804 -0.0127626168 0.1119693053 0.0282600865 0.0034431017 0.0630655820 0.0094516195 -0.0011319483 0.0801483754 0.0223151349 0.0034498582 0.0481326635 0.0129823331 0.0025704655 0.0789660138 0.0355787057 0.0103815394 0.0127652021 -0.0022942294 0.0091487626 -0.0179953045 0.0001433732 0.0300060867 0.0259322080 0.0108030761 0.0051361666 0.0089721552 0.0267442221 0.0208723863 0.0492508694 0.0080564760 -0.0087205731 0.0189734367 0.0363319698 0.0178985497 -0.0347595388 0.0172554466 0.0455507726 -0.0215854338 0.0304250985 0.0415839064 -0.0591905094 0.0194247554 0.0615173370 -0.0349587188 0.0431471082 0.0543692693 -0.0421103256 -0.0492112606 0.0125183114 -0.0143013019 -0.0803995761 0.0270499841 -0.0848436186 -0.0565356345 0.0268766209 -0.0337184058 -0.0220347903 -0.0082501836 -0.0404678104 -0.0360810145 -0.0083535184 -0.0394785370 -0.0561932929 -0.0275141742 -0.0491121001 -0.0127242656 -0.0169528114 -0.0321563013 -0.0401922297 0.0141246171 -0.0064118847 -0.0020663295 -0.0350339725 0.0114879906 0.0004896321 -0.0244420191 0.0068065299 0.0013590209 -0.0198524807 -0.0012883621 0.0024362354 -0.0089444606 -0.0053954400 -0.0017821896 -0.0211933044 -0.0042258363 0.0024543202 -0.0120502192 -0.0051106844 0.0035231012 -0.0073694806 -0.0011338366 0.0044372030 -0.0248264870 -0.0040519965 0.0031917335 -0.0179562003 0.0013713715 0.0046908187 -0.0319288113 -0.0051738371 0.0003057371 -0.0086834718 -0.0026828688 -0.0046306557 -0.0132813591 -0.0020905160 0.0160394997 0.0035780841 0.0277024501 0.0246343864 0.0177134269 -0.0317478627 0.0338981873 0.0113288031 -0.0194991303 0.0033066172 0.0068306730 0.0932133808 -0.2332899557 0.1778053330 0.0569772079 -0.1760669457 0.1386771279 -0.0208346102 -0.0402118463 0.0452107878 0.0745879164 -0.1890920617 0.1198279360 -0.0103750475 -0.0865357247 0.1083616745 -0.0490595862 -0.0196008568 0.0614852312 0.0322271850 -0.1180387012 0.0702339807 0.1231102536 -0.2541260251 0.1418473634 -0.0305089654 -0.0716008549 0.1248364075 -0.0921897799 0.0378867449 0.0436786632 -0.0214625566 0.0024623871 0.0145782362 -0.0130716130 0.0221775506 0.0173705691 -0.0214789283 0.0274310214 0.0334835058 0.0060108226 0.0420172234 0.0116554178 0.0428702547 0.0973016639 -0.0026011848 0.0191168182 0.0578919227 0.0345964820 0.0136503594 0.0501323540 -0.0170322464 0.0337429378 0.0767758860 -0.0248234760 0.0362476040 0.0879209337 0.0271800966 0.0139154650 0.0495429433 0.0592601436 0.0046302509 0.0349103114 -0.0362890403 0.0409617095 0.0819017756 -0.0501140841 0.0440271990 0.1029747055 0.0450365428 0.0559163625 0.1201880874 -0.0085548518 0.0531014218 -0.1361504028 0.0461310295 0.0159908814 -0.0754439457 0.0349677393 -0.0056667034 0.0051708395 -0.0089230995 -0.0000313253 0.0185517970 0.0063098964 -0.0001012340 0.0243434353 0.0034876541 0.0045105153 0.0175435509 0.0081804275 -0.0008631407 0.0162199431 0.0375825129 -0.0668336402 0.0443570933 0.0569033747 0.0261388772 0.0215555147 -0.0238937134 0.0416259253 -0.0238923423 0.1083566706 -0.0049004116 0.0323507529 -0.0015647080 -0.0054001446 0.0364125145 -0.0036980334 -0.1178874072 0.0156368776 0.0110492646 -0.0162085125 0.0410938811 0.0627190011 -0.1027229197 0.0894973208 0.1093661587 0.0139734370 0.0283777873 -0.0497519028 0.0659181426 0.0191084977 -0.0238133707 0.0185399857 0.0238290974 -0.0317801048 0.0461457928 -0.0300068237 0.1308067487 0.0231781465 -0.0161532551 0.1516078377 0.0855243911 -0.0541076558 0.0918518763 -0.0009550318 0.0375139589 -0.0055163072 -0.0079447737 0.0353532160 -0.0023364015 -0.0082171700 0.0402711611 -0.0051449657 -0.0143270523 -0.0099368048 -0.0646059888 0.0235975150 -0.0472339194 -0.0634058829 0.0186682355 -0.0584722178 -0.0921912962 -0.0276639966 -0.0269763997 -0.1235499279 -0.0665210216 0.0092878158 -0.1244047340 -0.0597720018 0.0152623293 -0.0934153317 0.0574154333 -0.0704924481 -0.0418630888 0.0489318310 -0.0879438231 -0.0923051234 -0.0362399242 -0.0265735919 -0.1568410484 -0.1017250233 0.0331177456 -0.1493534827 -0.0913418470 0.0409655842 -0.0922025255 0.0218702377 0.0243455807 -0.0118427722 0.0211184277 0.0282864737 0.0035660092 -0.0089350282 0.0129565254 0.0214213318 -0.0368229223 -0.0054859091 0.0235212143 -0.0349291156 -0.0087176969 0.0078988292 0.0439912966 0.0360787534 -0.0240148083 0.0425999359 0.0418505745 0.0032281021 -0.0121399837 0.0140243708 0.0405900326 -0.0598762622 -0.0172250550 0.0373209484 -0.0571734491 -0.0225817900 0.0096552943 -0.0733997715 0.0039244802 -0.1683692521 -0.0075706114 -0.0549977305 -0.1709694824 -0.0379610721 0.0011201993 0.0508082894 0.0107983235 0.0280082965 0.0455975546 0.0168531089 0.0037880536 0.0046709567 0.0108198948 0.0051008991 0.0041795724 0.0345004881 0.0040808208 0.0303499817 0.0463555792 0.0054057491 0.0538224331 0.0392341852 0.0030028406 0.0321001686 0.0609665245 0.0055221272 0.0751285079 0.0211477294 0.0066171864 0.0232831692 0.0390160357 0.0068063206 0.0488069686 0.0164021097 0.0073008568 0.0188189025 0.0478109787 0.0080934417 0.0652483186 -0.0069282866 0.0064580048 -0.0062253720 -0.0030733006 0.0063200089 -0.0187306239 -0.0125042111 0.0102779328 0.0070660443 -0.0131299246 0.0129831308 0.0055143617 -0.0165667280 0.0110386378 0.0190990578 -0.0178780934 0.0157086909 0.0162605308 -0.0028918295 0.0091408092 -0.0216579571 -0.0075657042 0.0122450641 -0.0099395429 0.0003328067 0.0089044655 -0.0326054000 -0.0076011712 0.0142357611 -0.0117963873 0.0036393052 0.0119703610 0.0087981591 -0.0028805092 0.0207491748 0.0080599661 0.0149032090 0.0066218393 -0.0023161323 0.0045284302 0.0018195944 0.0219797886 0.0024543795 0.0127764548 0.0025027553 0.0048233021 0.0060938527 -0.0049762765 0.0008829197 0.0215386927 -0.0020023047 0.0017180360 0.0053151575 0.0122144545 0.0219041414 -0.0104657485 -0.0320802880 0.0437692776 -0.0102050177 -0.0086153149 0.0337957110 -0.0077218353 -0.0169367397 0.0121672782 -0.0023809084 -0.0294051607 0.0111220015 -0.0073793616 -0.0380182616 0.0108248381 0.0028376376 -0.0156121297 0.0084354267 -0.0029457736 -0.0196180208 0.0231315818 -0.0055434891 -0.0080595020 0.0217868280 0.0022100450 -0.0128368676 0.0292316200 -0.0062030169 -0.0066441642 0.0059456555 0.0131391613 -0.0169082695 0.0068937068 -0.0129621916 -0.0377525446 0.0041904264 0.0014444237 -0.0232558083 0.0041181851 -0.0129804293 -0.0024888293 -0.0021672668 0.0155336613 -0.0345908853 -0.0156335696 0.0384644527 -0.0006059018 0.1185886034 -0.0215672825 0.0268355921 0.0911927957 -0.0118443852 0.0202306117 0.0226515694 0.0091200451 0.0075785384 0.0172950039 0.0513884882 -0.0063502775 0.1295229039 -0.0599956121 0.0379806320 0.0932921841 -0.0472304367 0.0300042654 -0.0183227398 0.0625210914 -0.0138281012 -0.0141976245 0.0926411801 -0.0208959091 0.1862047902 -0.1061072291 0.0575441667 0.1218810065 -0.0810979411 0.0419684549 -0.0051634093 0.0083626064 0.0086946470 -0.0194745625 -0.0399752974 0.0138073357 0.0055689256 -0.0780534734 0.0095375912 -0.0518748756 -0.0313061553 0.0104657581 -0.1859254833 0.0587321012 -0.0113219549 -0.1035742254 0.0117337925 -0.0254626568 -0.0577695228 -0.0383245924 0.0373005008 -0.1265347476 0.0054663784 0.0273289337 -0.1727436523 0.0584195929 -0.0371894393 -0.0966322040 0.0156900180 -0.0464010679 -0.0121732557 -0.0743863158 0.0667382018 -0.1344248969 0.0010640091 0.0527854649 -0.2171480909 0.0962622944 -0.0653510535 -0.2399178041 0.0979681652 -0.0202313235 -0.0933800705 0.1252024574 -0.0382830807 -0.0518865600 0.0983361144 -0.0407544058 0.0295138099 0.0116832227 -0.0148940718 -0.0966719547 -0.0598297657 0.0377920400 -0.0640379066 -0.0238755968 0.0478523156 -0.0239972738 -0.0117385780 0.0176066810 0.0175961838 -0.0227521772 0.0127911821 0.0099669191 -0.0075979438 0.0196842515 0.0342121003 -0.0480723364 -0.0238218929 0.0561348941 -0.0000149643 0.0407867304 -0.0711494564 0.0076158247 0.0891019396 -0.0460270148 0.0682027387 0.0837951501 0.0002579988 -0.0141899760 0.0114843146 0.0293777968 -0.0090235864 0.0300005987 0.0026699664 0.0132675160 0.0237943746 0.0088347105 -0.0943005031 -0.0101186812 0.0460741320 0.0064747434 -0.0058695968 0.0656082299 -0.0568937516 -0.0815544027 0.0873901334 -0.0082986145 0.0435763466 0.0470155674 0.0284800120 0.0616882447 0.0620544672 -0.0067749193 0.0370516338 -0.0303962075 0.0671301791 0.0416177948 -0.0321405273 0.1011821462 0.0793769911 -0.0572949637 0.0828854018 0.1266504093 0.0242743224 -0.0124599939 -0.0285902003 0.0305514895 -0.0368598995 -0.0095319395 0.0300331319 -0.0312026172 -0.0037343741 0.0216243035 0.0038987139 -0.0202268644 0.0173048984 0.0262945004 -0.0370405747 0.0192934817 0.0147344267 -0.0395871710 0.0348099414 -0.0620233084 0.0002634455 0.0363213033 -0.0533018800 0.0115029550 0.0174123965 0.0210464164 -0.0185557147 0.0118704387 0.0521983216 -0.0487964002 0.0160615538 0.0297652212 -0.0520954070 0.0290520261 0.0075240879 -0.0112621460 0.0322656068 0.0125019518 -0.0112388895 0.0363985310 0.0213204305 -0.0146455140 0.0397783003 0.0291738254 -0.0198390173 0.0367582658 0.0243142105 -0.0199968902 0.0249131139 -0.0011155077 -0.0083919072 0.0301800700 0.0076395483 -0.0079025674 0.0324170736 0.0166048958 -0.0093806688 0.0428449851 0.0367303444 -0.0223143326 0.0386126056 0.0288335460 -0.0233778716 0.0022736512 0.0865697618 -0.0256074407 0.0286693350 -0.0314863042 -0.0103248009 0.0293012614 0.0185210359 -0.0080282191 0.0317355870 0.0091893397 -0.0052152639 0.0379602244 -0.0025948968 -0.0047065136 0.0263389968 0.0000667332 -0.0133462526 0.0583705258 -0.0012023181 0.0233961451 0.0677063249 0.0019844487 0.0431051088 0.0680128433 -0.0033247334 0.0310421607 0.0845493982 0.0025342084 0.0670026259 0.0344085485 0.0033058600 0.0029105193 0.0552981353 0.0042264642 0.0315530869 0.0254727678 0.0048478777 -0.0051180915 0.0624647831 0.0065761524 0.0458375708 0.0058003044 -0.0109242717 -0.0068494963 0.0142230259 -0.0122681803 -0.0012925718 -0.0075296309 -0.0183158654 0.0050712390 -0.0117792560 -0.0265618076 0.0208054060 -0.0152144881 -0.0173427119 0.0043820496 -0.0232758577 -0.0323438753 0.0309567151 0.0108554873 -0.0206487271 0.0131097664 -0.0018165547 -0.0277347034 0.0243035172 0.0175654091 -0.0212888672 0.0164741572 -0.0049809939 -0.0341937500 0.0364327455 -0.1399881781 -0.0824983803 0.0768920649 -0.1425130337 -0.0552596287 0.1227546325 -0.1465536213 -0.1010115916 0.0615466686 -0.1657905900 -0.1139327396 0.0795701385 -0.1122847123 -0.0570343344 -0.0149033266 -0.1492613408 -0.0404091993 0.0090257965 -0.0719499481 -0.0757111324 -0.0260245489 -0.1302065158 -0.0474871161 -0.0625072995 0.0027093294 -0.0208184157 0.0156984162 -0.0025717308 -0.0187411939 0.0027877521 -0.0021185079 -0.0188648762 0.0055099124 -0.0060300108 -0.0156267259 0.0047380018 -0.0006408619 -0.0204374947 0.0118014100 -0.0208162851 -0.0218301024 -0.0039051635 -0.0147508025 -0.0130266356 -0.0004709981 -0.0421177920 -0.0119437147 -0.0028962538 -0.0384548023 -0.0200861765 -0.0045189606 -0.0480899747 -0.0112652746 -0.0053246614 -0.0144320040 -0.0389181968 0.0005344705 -0.0033376516 -0.0246932954 0.0133415174 -0.0059500882 -0.0242140973 0.0182096211 0.0158454570 -0.0131599509 0.0205630031 -0.0229413363 -0.0156999545 0.0236145192 -0.0230047521 0.0002991531 -0.0360143795 0.1460684722 -0.0266232716 -0.0299774617 0.1062126093 -0.0170709643 -0.0364915868 0.0076534648 0.0022521421 -0.0487098883 0.0886023140 -0.0043847449 -0.0163682260 0.0721160594 -0.0169957139 -0.0642762839 0.0226765319 -0.0076539339 -0.0692984079 0.0381157945 0.0054538233 -0.0224278888 0.1142956701 -0.0032152670 0.0060141128 0.0841249129 -0.0255172817 -0.0810879038 -0.0044507231 -0.0082346950 -0.0893018643 -0.0182558541 0.0014423753 -0.0504572199 -0.0194112705 -0.0100248036 -0.0446706887 -0.0177825413 -0.0192287213 -0.0325775484 0.0030802650 -0.0050881347 -0.0465886744 0.0818486109 0.0060089932 -0.0509367491 0.0267520749 -0.0008355993 -0.0178125535 0.0131240270 0.0009581775 -0.0786720132 0.0552691785 0.0059141360 -0.0811638529 0.0671039745 0.0047490585 -0.0195744898 0.0168970456 -0.0033954481 0.0076798211 -0.0105225895 0.0011454962 -0.1048799746 0.0671056471 0.0073832567 -0.1103175718 0.0870975265 0.0067017905 0.0043498536 0.1129728298 0.0074434014 -0.0518367456 0.0252577770 0.0173131300 -0.0005675820 0.0096634158 0.0083300627 0.0076468369 -0.0417476077 -0.0212419678 0.0022008983 -0.0454494619 -0.0162321404 -0.0301639608 -0.0075408134 0.0043583065 -0.0088391492 0.0340096440 0.0068113518 -0.0297180008 0.0495349012 0.0023752297 -0.0301806320 -0.0575712160 0.0200139396 -0.0117303367 0.0939852659 -0.0062526984 -0.1334188299 0.1331614449 -0.0107757974 0.0680081292 -0.0078859544 0.0224025865 0.0369011034 0.0397315051 0.0400035448 0.0657846418 -0.1164620660 0.0024683587 -0.0716279928 -0.0243770948 0.0180175937 -0.0095109061 -0.0981027638 0.0490354065 0.0601371276 0.0669713972 -0.0081394883 -0.1710306136 0.1546681691 -0.0075859258 -0.1322794458 0.0952620694 -0.0066173434 -0.1475871484 0.1584276723 -0.0173577991 0.0697901815 0.1015407211 0.0046591102 0.1418582449 0.1988733465 -0.0289198044 0.0591462061 0.0471273835 0.0427148146 0.0698631556 0.0761308201 0.0401471398 0.0451936682 0.0314787137 0.0506716075 0.1050998776 0.0040723802 -0.0139260282 0.0268128271 -0.0232022282 0.0222827902 0.0165771344 -0.0274857917 0.0428873297 0.0236691559 -0.0024676863 0.0247729971 0.0410070638 0.0260050267 -0.0132050507 0.0521190608 0.0297674112 -0.0321781279 0.0445127559 -0.0415350736 0.0368609999 0.0041712688 -0.0484329809 0.0704517209 0.0171925059 -0.0053097754 0.0434520150 0.0481472594 0.0453101826 -0.0271689853 0.0661581918 0.0529011685 -0.0595741706 0.0519575028 0.0368362787 0.0632873248 -0.0344430588 0.0446038574 0.0799394608 -0.0207629441 -0.0303079401 0.0131732350 0.0278830597 -0.1116951937 -0.0725160838 0.0624299514 -0.1185154370 -0.0886078828 0.0490726268 0.0929385668 0.1203415044 -0.0677614588 0.1065113745 0.1432049106 -0.0438674151 -0.0234361050 0.0310148016 0.0484214355 -0.1675614286 -0.1249118848 0.0983412171 -0.1840431503 -0.1528884875 0.0765460380 0.0096871974 0.0180021913 0.0533761640 -0.0220069016 0.0841119431 0.0482132696 -0.0551713840 0.0166660356 0.0609518605 0.0128050319 0.0597271470 0.0525439143 -0.0066139370 -0.0147144465 -0.0021177693 -0.0070810570 -0.0141105613 0.0013180334 -0.0106150713 -0.0112569253 -0.0132603447 -0.0145619078 -0.0080501577 -0.0185565463 -0.0104933494 -0.0113645378 -0.0174892554 -0.0180928618 -0.0056151234 -0.0275071469 -0.0096101993 -0.0110409376 -0.0009888773 -0.0133573491 -0.0081049866 -0.0110829388 -0.0092063390 -0.0107213001 0.0050525694 -0.0155267243 -0.0057816088 -0.0133418947 -0.0233625955 -0.0029809525 0.0043424120 -0.0384686900 -0.0015369130 0.0047229283 -0.0205439918 0.0067335266 0.0113851224 -0.0341043016 0.0186104996 0.0247800422 -0.0084891830 0.0052177207 0.0068392038 -0.0320670917 0.0266453015 0.0319684103 -0.0512209400 0.0106416342 0.0172804986 -0.0502724229 0.0206110025 0.0290481565 -0.0628909398 0.0117128078 0.0189552512 -0.0611681618 0.0298058234 0.0405655722 -0.0878631371 -0.0248927495 0.0002493893 -0.0932208309 0.0007660569 0.0353283843 -0.0897623727 -0.0332581595 -0.0071963650 -0.1134472938 -0.0517499030 -0.0024851274 -0.0557005234 -0.0208348826 -0.0790070665 -0.0798889413 -0.0321132927 -0.0851757778 -0.0359056017 -0.0051390728 -0.0990717680 -0.0618233620 -0.0243411920 -0.0851325251 -0.0186652230 0.0248299633 0.0310667618 -0.0194681902 0.0267165140 0.0233698281 -0.0201749435 0.0267892715 0.0247653756 -0.0186749400 0.0246227430 0.0305351192 -0.0183401696 0.0250776657 0.0312531820 -0.0017809517 0.0284802142 0.0212370530 -0.0110464844 0.0230810343 0.0292143072 0.0303718700 0.0196318394 -0.0101068671 0.0198071779 0.0292903022 0.0009671914 0.0482216454 0.0192983356 -0.0287882558 -0.0042424391 0.0323993826 0.0218446027 -0.0187205976 0.0282957427 0.0248226430 -0.0085398641 0.0239925510 0.0114752978 -0.0152704696 0.0235177200 0.0057198846 -0.0015912677 0.0190301057 0.0108218940 0.0163724136 -0.0742652570 0.0084766752 -0.1952096482 0.1271720042 -0.1302735899 -0.1384849922 0.0717394963 -0.0924026123 -0.0064987491 -0.0543761062 -0.0035090000 -0.0815908400 0.0206062983 -0.0516084442 -0.1208367836 0.0488180835 -0.0840349506 -0.0528207787 -0.0163413481 -0.0399049636 -0.0118565687 -0.0448780751 -0.0053628111 -0.0908787768 0.0337978436 -0.0556334982 -0.1612595373 0.0826929731 -0.1139258640 -0.0453131149 -0.0318678638 -0.0387791317 0.0188902008 -0.0844254816 0.0194436733 0.0206035017 -0.0769295982 0.0211409032 0.0197862287 -0.0807193718 0.0329748626 0.0185308336 -0.0433591447 0.0098193237 -0.0251380542 0.1045260729 -0.0278316575 -0.0075495706 0.0212301828 0.0141699202 0.0265031081 -0.0412663066 -0.0112177792 0.0064566469 0.0326973917 -0.0307851416 -0.0303665084 0.0968975702 -0.0050593472 -0.0144445647 0.0183577910 0.0334893024 0.0436715507 -0.0908759918 -0.0198246433 0.0118171705 0.0371108051 -0.0510531491 -0.0545405103 0.1515313905 -0.0002380016 -0.0456547254 0.1655266747 -0.0427403724 0.0453945805 -0.0931880953 0.0274835699 0.0171243805 -0.0759578642 0.0296570711 0.0355087274 0.0456697492 -0.0109498796 0.0116155370 -0.0984258367 -0.0074424923 0.0172752997 -0.0880224550 -0.0088061460 0.0286930620 -0.0951421951 -0.0074814048 0.0404572057 -0.1020573559 0.0387204999 0.0362194472 -0.0534424433 0.0594292638 0.0569987547 -0.0746352425 -0.0041732150 0.0563542458 -0.1524779787 0.0869221423 0.0106781271 -0.0755460678 -0.0123637305 -0.0015238432 -0.0492192978 -0.0325345982 0.0131665707 -0.0779166891 0.0434369513 0.0923602497 -0.0573804333 0.0836971702 0.0183941998 0.0063890311 0.0644096519 0.0367594374 -0.1470199868 0.0466847198 0.0763500191 0.0526142920 0.0375902130 0.0790834909 -0.0797684016 -0.1346787085 0.0592233390 -0.1643635608 0.1368204113 0.0484765102 -0.1331491683 0.1053610906 0.0751678635 -0.2018224703 0.0586928199 -0.0063102895 -0.0552716965 -0.0678418016 -0.0104154070 -0.0170217918 -0.0242261250 0.0019405120 -0.0541432026 -0.0218458400 -0.0178835415 0.0178901428 0.0273360834 -0.0024533517 0.0024144692 0.0278141145 -0.0030333693 -0.0046307708 0.0165998004 -0.0197135095 0.0016626882 0.0070417929 -0.0342836781 0.0130971473 0.0087979362 -0.0336897920 0.0219385301 0.0188537475 0.0092766574 -0.0009096580 0.0338115530 0.0055553432 -0.0081318584 0.0116778038 -0.0279424947 0.0107829377 -0.0154567636 -0.0478120886 0.0195325403 0.0001372609 -0.0469356099 0.0332310477 0.0191437361 0.0663675238 0.0864347034 -0.0327535742 0.0750015283 0.0984077790 -0.0386563144 0.0546011675 0.0714309156 -0.0241614596 0.0294982955 0.0379530008 -0.0071536335 0.0196128836 0.0250531675 -0.0004710210 0.0810209057 0.1079212340 -0.0419783942 0.0941759281 0.1246163676 -0.0518272645 0.0518680016 0.0690078107 -0.0204320505 0.0147618253 0.0188958634 0.0028859785 -0.0026666418 -0.0036537099 0.0151701215 -0.0551326106 0.0377370377 -0.0241897483 -0.0083440026 -0.0059801933 -0.0263001121 0.0323264075 0.0431899970 -0.0123258210 0.0685233248 0.0890425677 -0.0230297960 -0.0261069030 0.0284280624 0.0138002230 -0.0247885464 0.0277062620 0.0185692039 -0.0368207468 0.0320663932 -0.0075163169 -0.0474765337 0.0360738469 -0.0246993017 -0.0377441802 0.0322017570 -0.0123122912 -0.0569675497 0.0392416476 -0.0435126533 -0.0340352351 0.0320824093 0.0051796128 -0.0458735054 0.0359660732 -0.0175464961 -0.0334513359 0.0320982127 0.0100323604 -0.0542472145 0.0389242666 -0.0303300118 -0.0017374519 0.0144232449 0.0196646350 0.0198502055 0.0124740450 -0.0006884359 -0.0095648403 0.0073814244 0.0229757513 0.0030287258 -0.0013942126 0.0083365271 -0.0251633319 0.0091983904 0.0350126110 -0.0028227091 -0.0061806856 0.0111297415 0.0325979087 0.0031863259 -0.0157859537 0.0242050996 -0.0038753890 -0.0114404673 0.0498172760 0.0016858426 -0.0316093475 0.0343745066 -0.0110749759 -0.0235362907 0.0019633937 -0.1064966178 0.0024232028 0.0325638534 -0.1409374073 0.0181495282 -0.0466840862 -0.1097047068 0.0239968287 0.0080322664 -0.0749139811 -0.0270368687 0.0073422983 -0.0961830844 -0.0181005660 -0.0020044453 -0.0984228698 -0.0187466950 0.0088793190 -0.0905444807 -0.0221947521 0.0100098873 -0.0924014260 -0.0186335815 -0.0012628900 -0.0037413795 0.0046838660 -0.0045728869 -0.0082095749 0.0174091307 -0.0029912819 -0.0083219369 0.0101857124 -0.0051786498 -0.0058861362 -0.0151237130 -0.0023091975 -0.0034467984 -0.0061551978 -0.0144363744 -0.0090470108 -0.0217629814 -0.0091646621 -0.0044865348 -0.0237589154 -0.0347739230 -0.0015100241 -0.0064380496 -0.0251611939 -0.0100693478 -0.0156544254 -0.0489100008 -0.0009808530 0.0044394054 -0.0182779246 -0.0115403434 -0.0130832059 0.0011886736 -0.0026786475 -0.0025151063 -0.0053432770 0.0053780958 0.0103625202 0.0203434776 0.0128701622 0.0228365158 -0.0339901681 0.0149350203 0.0261396550 -0.0279922157 -0.0135142329 -0.0298907811 0.1525606605 -0.0534253841 -0.0129252664 0.1058848888 -0.0382721750 -0.0232610424 -0.0041524876 -0.0071021688 -0.0418188527 0.1057349584 -0.0415142461 0.0084249637 0.0437226422 -0.0136849073 -0.0672115959 -0.0106083847 0.0004376542 -0.0756884811 0.0480313613 -0.0235776493 -0.0026288488 0.1516595796 -0.0572852427 0.0430488311 0.0388939865 -0.0083591260 -0.0924334998 -0.0567150899 0.0135082190 -0.1067018563 -0.0242060393 -0.0107501650 -0.0407092135 -0.0200208854 -0.0198608881 -0.0255951793 -0.0240011471 -0.0186008139 -0.0156256014 0.0069404069 -0.0187588449 -0.0268968551 0.0732460653 0.0230963057 -0.0382971003 -0.0006623189 0.0356493447 -0.0074800706 0.0441177577 -0.0500883792 -0.0514833401 0.0807450572 -0.0299629590 -0.0581928242 0.0323436230 0.0578143985 -0.0135523763 -0.0318636096 0.0600208562 0.0140102459 0.0452494001 -0.0903788272 -0.0723717460 0.1119360491 -0.0547878921 -0.0836860682 0.0250966956 0.1000188064 0.0031608027 0.0977748374 0.0372206301 -0.0422638406 0.0528800297 -0.0276051503 0.0223752746 0.0166141336 -0.0115091075 0.0280221831 -0.0306902235 -0.0173916661 -0.0156538662 -0.0276070683 -0.0045652585 0.0147244991 -0.0054318028 -0.0047990433 0.0341258270 0.0265256431 -0.0290593648 0.0449383587 0.0271895962 -0.0328389488 0.0918140083 0.1466207594 -0.0189821543 0.0856398183 -0.0187612879 -0.0553307125 0.1967653754 -0.0452591670 -0.0298908080 0.0125491726 -0.0131696152 0.0145754836 0.0412687463 0.0034717982 0.0194727229 0.0520222484 0.2151245319 0.0108267112 0.1502071324 0.1023430932 -0.0174326641 0.0994185420 0.1952714908 -0.0499569632 -0.0029108407 -0.0014462798 -0.0737210887 0.2421290392 -0.0879852226 -0.0402240180 0.1997509070 -0.0013027554 -0.0602033201 0.1985974568 -0.0415158494 -0.0394436474 0.0517680124 -0.0128029518 0.0005217758 -0.0637544563 -0.1281420208 -0.0469772158 0.0003791296 0.0055148477 0.0201617629 0.0531827697 0.0158773627 0.0196611589 0.0448149803 0.0006532788 0.0231170444 0.0652472887 -0.0025551526 0.0038318532 0.0077442052 -0.0215414423 0.0358881986 -0.0062032495 -0.0287861399 0.0570389979 -0.0095693673 -0.0146502011 0.0434169938 0.0013278779 0.0077529966 0.0042517444 0.0185521461 0.0141360128 -0.0140522913 0.0209570243 -0.0312386870 0.0482595558 -0.0143021956 -0.0448156061 0.0848340650 -0.0207023869 -0.0267367519 0.0796915312 -0.0102279387 0.0179989590 -0.0065430691 0.0271246161 0.0317809345 -0.0399399829 0.0317096186 -0.0946831877 -0.0964681317 0.0241684198 -0.0888728349 -0.0919733771 0.0141552793 -0.0185117232 -0.0092606844 -0.0342909131 0.0410782272 0.0628289015 -0.0679879217 0.0348863537 0.0556335723 -0.0573265363 -0.1466637991 -0.1621946552 0.0560692207 -0.1350032845 -0.1464919295 0.0381151261 -0.0027110438 0.0120951937 -0.0533783664 0.0937646355 0.1264788018 -0.1035235181 0.0848148702 0.1125973635 -0.0860986041 -0.0293672334 0.0644747431 -0.0104179297 -0.0341232528 0.1269005628 -0.0201894045 0.0455870236 0.0718438422 -0.0726856861 -0.0379890816 -0.0315345075 -0.0477828883 -0.0023525114 -0.0122780514 0.0084235516 -0.0042614595 -0.0115820553 -0.0056685019 0.0013508924 -0.0179116082 0.0227085932 0.0039594956 -0.0234383738 0.0237609294 0.0026877743 -0.0180087421 0.0340125844 0.0075639558 -0.0278561758 0.0358669491 -0.0022064301 -0.0177437201 -0.0058571538 0.0020742354 -0.0234656970 0.0090765983 -0.0031810221 -0.0178800170 -0.0156393881 0.0043470654 -0.0281872094 0.0098730912 -0.0152030018 0.0031362253 -0.0191299596 -0.0297499038 0.0044562697 -0.0073199708 -0.0109319990 0.0092369598 -0.0182377786 -0.0221510208 0.0166687348 -0.0048251098 0.0007835886 0.0078581150 -0.0265010731 -0.0192348911 0.0208691348 -0.0038874741 -0.0413986935 0.0123945797 0.0066342185 -0.0377175421 0.0184701779 0.0086023769 -0.0539872904 0.0134896543 0.0163328262 -0.0469136261 0.0243447298 0.0201540389 -0.0533995080 0.0151945316 0.0182130969 -0.0626088657 0.0314087317 0.0247898023 -0.0450384911 0.0248728880 0.0237847193 -0.0703639929 0.0026193998 0.0097607531 -0.0263164873 -0.0133910564 0.0004790124 -0.0333519363 -0.0049099963 0.0103144322 -0.0082184306 -0.0244541958 -0.0026484503 -0.0378295890 -0.0156684292 -0.0167770681 0.0181839197 -0.0147266867 -0.0418852589 0.0387110232 -0.0076206013 -0.0406928844 0.0305783058 -0.0058395115 -0.0339716727 0.0032479291 0.0023112358 -0.0117394853 0.0028097660 -0.0120090734 -0.0277273297 -0.0078220337 0.0088381460 0.0270048189 -0.0041106548 0.0011050604 0.0092569594 0.0283297872 -0.0021058012 0.0038556374 0.0142783131 0.0080758636 0.0232042392 0.0423212558 -0.0026719455 -0.0061602734 -0.0194402912 0.0247321490 0.0338763518 -0.0045865768 -0.0329304498 -0.0086959235 -0.0161490518 0.0054590895 0.0316230851 0.0070367076 -0.0114851337 0.0777060134 -0.0466495781 0.0432627580 0.0128982723 -0.0672927486 0.0224400915 -0.0214644591 -0.0207080606 -0.0707804695 0.0433031421 -0.0339962732 -0.0497823988 0.0289002526 -0.0636092301 0.0014942818 -0.0092293839 -0.0034404559 -0.0754684469 0.0355919807 -0.0817370738 0.0015676749 0.0044483132 -0.0950263084 0.0255648694 -0.0126737631 -0.0187775955 -0.0485580539 0.0171845013 0.0332126972 -0.1169099946 0.0545374449 -0.1059936749 0.0210679928 0.0003049764 -0.1273392953 0.0590076746 -0.0275828753 -0.0660611310 0.0248286216 -0.0279215319 -0.0649429782 0.0185624427 -0.0247594687 -0.0655799412 0.0198726402 -0.0230091657 -0.0508379477 0.0041505784 -0.0223490148 0.0463929788 -0.1281133015 0.0083993844 -0.0190619268 -0.0414166592 -0.0095419990 -0.0414484439 -0.0069945128 -0.0234771321 0.0062083857 -0.0719180742 -0.0068906834 0.0317201273 -0.1099582240 0.0070993252 -0.0253510107 -0.0322721386 -0.0124183551 -0.0647752547 0.0232351564 -0.0331651298 0.0159985815 -0.0844089581 -0.0063774704 0.0623246700 -0.1503472311 0.0180253372 0.0885033841 -0.1852227996 0.0219513461 0.0138114947 -0.0763794342 0.0255796009 -0.0188469285 -0.0410943065 0.0231838785 0.0296807100 0.0257177036 0.0159401807 -0.0832479776 0.0158576452 -0.0464655030 -0.0821235384 0.0061055149 -0.0427468187 -0.0899151227 0.0109460099 -0.0435331806 -0.0674214439 0.0011298674 -0.0034558551 -0.0800064289 0.0779976426 0.0302661640 -0.0410262348 -0.0226271862 -0.0573199920 -0.0298738746 -0.0383659306 0.0617751116 -0.0761250701 -0.0075130354 -0.0373394019 -0.0672300152 -0.0331138256 -0.0207512565 -0.1386651906 0.0253139215 -0.0131860925 0.0362686000 0.0699180155 0.0715434400 -0.1245011163 0.1961086399 0.0599948136 -0.0578024114 -0.0162028869 -0.0895807859 0.0003230987 -0.0364748465 -0.0608541070 -0.0348310176 -0.0236561083 -0.0544990491 -0.0252278381 -0.0468829487 0.0945076639 -0.0439144040 -0.0252382461 0.0942859267 0.0020044826 -0.0755061974 0.0408202394 -0.0665571895 -0.0288056436 0.0096742095 -0.0603883172 -0.0588283732 -0.0271027740 -0.0683802700 -0.0314636107 -0.0304020512 0.0224637956 -0.0161382584 -0.0331886528 -0.0209514451 0.0444069148 -0.0519959952 -0.0183854026 0.0548185805 -0.0275205794 0.0333368728 0.0030418963 0.0138660435 0.0786990473 -0.0565882591 0.0306469436 0.0736523550 -0.0655502275 0.0063960177 -0.0557907862 0.0822406247 -0.0789074377 -0.0525368696 0.0966650797 -0.0354139551 0.0442560026 -0.0006031675 0.0528391269 0.1189259926 -0.0996143063 0.0647048185 0.1122697307 -0.1121031179 0.0194154301 0.0149077530 0.0124458205 0.0201935333 0.0322230591 0.0335816660 0.0007068778 0.0660251698 0.0665207572 -0.0218480887 0.0838184583 0.0808995658 -0.0254974231 0.0659939306 0.0603334767 -0.0064981351 -0.0111468631 -0.0146289534 0.0357491055 0.0178831707 0.0230077497 0.0023096756 0.0749378614 0.0777430424 -0.0402999475 0.1088738974 0.1067057875 -0.0417920198 0.0805342342 0.0710025815 -0.0094323138 0.0986607969 -0.0706398308 0.0708879191 0.0005185373 0.0649177718 0.0674044878 0.0736529770 0.0535030529 -0.0395243843 0.0833002044 0.1084463201 -0.0544007583 0.0413019771 0.0075597153 -0.0022720671 0.0239716282 0.0117165220 0.0016466922 0.0779950046 0.0152494936 0.0404414522 0.0986676449 0.0250690270 0.0862072041 0.0928680742 0.0117769732 0.0413524897 0.1301638905 0.0296577088 0.1253920289 0.0381642280 0.0224838333 0.0328629192 0.0768653111 0.0292416505 0.0784514215 0.0225962806 0.0251319998 0.0247874847 0.0905495229 0.0381134231 0.1087033039 0.0067902761 -0.0091340395 0.0009696627 0.0269073043 -0.0115340626 -0.0082863120 0.0028493721 -0.0178382110 -0.0027671056 0.0235286344 -0.0301059237 -0.0292337576 -0.0155629307 -0.0151318600 0.0154884368 0.0203507674 -0.0375362218 -0.0338997116 0.0480589913 -0.0236737578 -0.0364764413 0.0485386892 -0.0331932027 -0.0501699191 0.0647160821 -0.0251469565 -0.0481924017 0.0661918553 -0.0427436585 -0.0739904982 -0.0776876723 -0.0014034436 -0.0388416202 -0.0698173151 -0.0089304044 -0.0323126894 -0.0886010807 -0.0116987348 -0.0437250001 -0.0711152481 0.0031144536 -0.0358087693 -0.0862419596 0.0185932561 -0.0499602874 -0.0854838137 0.0122180132 -0.0567071200 -0.0939270538 0.0272061542 -0.0509557059 -0.0784484571 0.0177703388 -0.0373501839 -0.0236068717 0.0426067477 -0.0248368438 -0.0427760338 0.0443219843 -0.0516698799 -0.0302688065 0.0409787544 -0.0322379750 0.0025181740 0.0319959882 0.0231221107 -0.0106530676 0.0380438678 -0.0008627323 0.0272658102 0.0357218983 0.0232032389 0.0159045748 0.0283496566 0.0317412578 0.0606267175 0.0278204480 -0.0035648885 0.0516612286 0.0353924232 0.0088403639 0.0740349904 0.0275207216 -0.0161409311 0.0241176784 0.0499841592 0.0146902707 -0.0127213788 0.0373349546 -0.0040860379 0.0018861200 0.0491984164 -0.0100192887 0.0000145679 0.0452110516 -0.0061670568 -0.0029878626 0.0637648883 -0.0232991053 -0.0112641768 0.0076800582 -0.0367957803 -0.0738952092 -0.0286336027 -0.0116753265 -0.0600504278 -0.0249309004 -0.0142777854 -0.0237829906 -0.0106340709 -0.0225381815 -0.0002282553 -0.0765251663 0.0034712194 -0.1020904483 0.0297047572 -0.0331282735 -0.0808181559 0.0331467562 -0.0368358222 0.0187755986 -0.0688495988 -0.0011510224 0.0344142833 -0.1210416583 0.0197540003 -0.1488164983 0.0673795484 -0.0432189611 -0.1100664350 0.0658024859 -0.0498039426 -0.0094432912 -0.0000810827 -0.0295542162 -0.0068590814 -0.0123112845 -0.0179970214 -0.0045225795 -0.0106154138 -0.0243267390 -0.0202982383 -0.0266049329 -0.0160896073 -0.0777737937 -0.0676883687 -0.0062009639 -0.0491287691 -0.0239225337 -0.0469977879 -0.0203542740 -0.0461610776 0.0180764522 -0.0512198927 -0.0671272951 0.0244709069 -0.0777698174 -0.0463433194 -0.0417953832 -0.0501898541 -0.0052961404 -0.0772116514 -0.0012151658 -0.0435229266 0.0409759406 -0.0536667213 -0.0819299973 0.0565861478 -0.0997429697 -0.0453699972 -0.0663596587 -0.0987276061 -0.0836782161 -0.0018455779 0.0837351597 -0.1244383585 0.0090033148 0.0363428213 -0.0701932327 0.0039199899 0.0492307743 0.0297313952 0.0074731702 -0.0304206612 -0.0051828477 -0.0160473775 0.0210068143 0.0154182081 0.0132162625 0.0880749455 -0.0080196697 0.0099322934 0.0731992396 -0.0021742592 -0.0313360057 -0.0195743850 -0.0639631513 -0.0476500720 0.0839665580 -0.0167763786 -0.0630492827 0.1204794227 0.0328438101 -0.0010978522 0.0035031400 0.0633312478 0.0479045664 0.0542630596 0.1036995791 0.0697843345 -0.0285952956 -0.0418633219 -0.0678907058 -0.0839042890 -0.0590153677 -0.0915003715 -0.0222692614 -0.1425079888 0.0026415123 0.0851828506 0.0207777083 -0.1028087838 0.0970866655 -0.0876578988 -0.0854276493 0.0680323692 -0.0137426659 0.0047327479 0.1497264975 0.0323330353 -0.0303278873 0.1041586306 0.0457149777 0.0370965130 0.1458173288 0.0517256125 0.0106777671 0.0803277589 0.1105006768 0.0632573829 0.0832359123 0.1028017105 0.0531125127 0.0340128182 0.1305735780 0.1101746510 -0.0250781769 0.0468407774 -0.0261473960 -0.0418565501 0.0731240282 -0.0363804291 -0.0369823779 0.0674917960 -0.0239690483 -0.0139100472 0.0349091911 -0.0023126241 0.0033118975 0.0094934934 0.0066047156 -0.0029687587 0.0172946719 -0.0061359958 -0.0582295275 0.0967458037 -0.0508813880 -0.0504786810 0.0866585194 -0.0295792105 -0.0090553921 0.0295268974 0.0115313786 0.0208661947 -0.0159164688 0.0237412651 0.0114977879 -0.0024286268 0.0011392835 -0.0015825103 -0.0232854463 0.0292634900 -0.0361229133 -0.0742686636 0.0387548805 -0.0159538815 -0.0737535776 0.0282508624 0.0439548893 -0.0089632943 0.0016454081 0.0793802499 0.0439910253 -0.0092908448 -0.0183187411 -0.0336170351 0.0385957400 -0.0799680120 -0.1199429897 0.0559759050 -0.0634572602 -0.1525833092 0.0448927067 0.0585900535 -0.0059007715 -0.0065321251 0.1256372328 0.0878234165 -0.0268787768 0.0121684347 -0.0050438303 0.0187456712 -0.0259628278 0.0611767551 0.0148883367 -0.0588931695 -0.1505600859 0.0430383395 -0.1071704193 -0.2171280898 0.0589661389 -0.0180632899 0.0354680625 -0.0095178078 0.0005488231 0.0310517162 0.0209106149 -0.0218979062 0.0341695701 -0.0129026616 -0.0054841902 0.0289675667 0.0145449075 -0.0373384386 0.0373513486 -0.0365521090 -0.0076751422 0.0278547616 0.0130555853 0.0158328699 0.0266741405 0.0449297091 0.0136996107 0.0256534196 0.0437376903 0.0303807646 0.0239675688 0.0624744095 0.0262996076 0.0228401346 0.0641178803 0.0259279525 0.0198996019 0.0231020405 0.0525190939 0.0180181511 -0.0009748869 0.0163128276 0.0126878225 0.0294611880 0.0356808791 0.0015125352 0.0049027499 -0.0054209407 0.0154012182 0.0507246523 0.0285420435 -0.0044259011 0.0082030360 0.0720620707 0.0062471436 -0.0263227101 0.0650695228 -0.0021009366 -0.0257791034 0.0938755420 0.0043610675 -0.0477707024 0.0812502762 -0.0109238423 -0.0475307219 -0.0875189783 -0.0040352419 0.0177714220 -0.0948749045 0.0268545536 0.0575620974 -0.0911396435 -0.0059459065 0.0175563253 -0.1233749695 -0.0338181146 0.0048846047 -0.0234176092 -0.0412384194 -0.0628415330 -0.0308821552 -0.0383045563 -0.0583624908 0.0181415259 -0.0524136706 -0.0790030550 -0.0520426801 -0.0585198267 -0.0838710036 0.0241281876 -0.0049713399 0.0787301327 0.0525441617 -0.0091511940 0.1248778616 0.0366939940 -0.0048634480 0.0995235459 0.0000105565 0.0069849637 0.0424950020 0.0026364866 0.0014116572 0.0476696379 -0.0076557914 0.0077175767 0.0775851448 0.0029842039 0.0062162849 0.0520551898 -0.0440237968 0.0062737117 0.1495508511 -0.0359309970 0.0053421448 0.1353877301 -0.0644379108 0.0053641943 0.1895904440 0.0173578588 0.0063796461 0.0297776917 -0.0239343943 -0.0045862249 0.0129955705 -0.0096185880 -0.0389791454 -0.0307082894 -0.0706675356 -0.0562452117 -0.0587695072 0.0538291214 -0.0622659546 -0.0630200523 0.0008720977 -0.0048271232 -0.0443419300 -0.0169418765 -0.0786584344 0.0193943209 -0.0159901314 -0.0607825143 0.0071721014 -0.0124404871 -0.0183324219 -0.0238079112 -0.0421684400 -0.0348835284 -0.0312009787 0.0120530167 -0.0629199927 0.0292680519 0.0118145742 -0.0399477836 0.0134890922 -0.0406932560 -0.0148911560 -0.0462102454 -0.0644134012 -0.0327690435 -0.0496169821 0.0331530076 -0.0814314796 0.0585455470 0.0333061664 -0.0384456620 0.0297832767 -0.0047293994 0.0006364604 -0.0363359390 -0.0015944377 -0.0008028973 -0.0283103120 -0.0007022286 -0.0057878157 -0.0220987227 0.0069695636 0.0027112193 -0.0302307415 0.0278560750 0.0278193357 -0.0375454927 0.0185463072 0.0026981810 -0.0173410296 0.0045784947 0.0145070727 -0.0474151890 0.0166334065 0.0263082569 -0.0510660561 0.0289218395 0.0163613099 -0.0208441484 0.0194240591 -0.0060260233 -0.0037222618 -0.0070443652 0.0218958955 -0.0563118843 0.0169212654 0.0343903102 -0.0661771558 0.0379380314 0.0172036061 -0.0100610413 0.0354461591 0.0376016031 -0.0400918373 -0.0691750355 0.0101932853 -0.0740476692 -0.0266564646 -0.0102189503 -0.0809166780 -0.0350522460 -0.0008667773 0.1208699058 -0.0182523596 0.0004829343 -0.0144085526 0.0041142407 0.0140542360 -0.0025886339 0.0317009539 0.0166122441 -0.0171764811 0.0040631193 0.0216346326 -0.0030851983 -0.0606186035 0.0449560739 0.0139098369 0.0266777220 0.0340500594 -0.0584680275 0.0424454694 -0.0191874597 0.0643284631 0.0038573701 0.0261777599 0.0277818562 0.0358763631 0.0372303001 0.0474154898 -0.1106438307 0.0135888251 -0.0296128275 -0.0080655478 0.0418982496 0.0180811720 -0.0959404409 0.0903058443 0.0651122957 0.0197689202 0.0610796641 -0.0990027681 0.0682394541 0.0030567937 -0.0675396793 0.0032239448 0.0403460460 -0.0382613129 0.0447389078 -0.0243223003 0.0850265059 0.0240411056 -0.0133015217 0.1075485150 0.0870743016 -0.0474690661 0.0489904810 0.0284617821 0.0345023056 0.0432647315 0.0652311527 0.0500915173 0.0321627427 0.0371654827 0.0349617709 0.0824576758 0.0190847745 -0.0073009291 0.0629451730 0.0380601902 -0.0092130596 0.0476292942 0.0283060553 -0.0045716862 0.0154432164 -0.0014415607 0.0013729034 0.0005056410 -0.0220315607 0.0040496957 0.0156326363 -0.0112028547 -0.0000262269 0.0466228243 0.0622093341 -0.0126765843 0.0590083689 0.0439735456 -0.0059473711 0.0025640624 -0.0101530671 0.0011121200 -0.0334408213 -0.0459981974 0.0098375037 0.0022374866 -0.0275867651 0.0041041860 0.0569140394 -0.1011054376 -0.0359908355 0.1181927937 -0.0859278350 -0.0302695761 0.0625468055 -0.0065590290 0.0031434057 0.0156777985 0.0583956347 0.0322251046 0.0237996937 0.0451046588 0.0330712189 0.0754483651 -0.1624710774 -0.0620858584 0.1514466871 -0.1340698011 -0.0493661091 0.0528980703 0.0064642614 0.0032767227 -0.0496031521 0.1193255261 0.0565017854 -0.0117510765 0.1003804144 0.0608613729 0.0777868490 -0.0441501963 0.0160740212 -0.0435172004 0.0165488599 -0.0155941051 -0.0500229180 0.0413479308 -0.0353363000 -0.0628062114 -0.0194065879 0.0410923103 -0.0871487357 0.0159628867 0.0048940960 0.0616138749 -0.0090571052 0.0101913846 0.0258661176 0.0072742962 0.0122215192 0.0372287990 -0.0363398787 0.0260763206 -0.0352922035 0.0304787843 0.0073741059 0.0687032051 -0.0472578110 0.0321913962 -0.0607792142 -0.0532086132 0.0234823038 -0.0441219904 -0.0693113909 0.0318252674 -0.0795272709 -0.0800626351 0.0280646227 -0.0747626831 -0.1080418928 0.0421024563 -0.1410437954 0.0216701255 0.0036371440 0.0245028697 -0.0050018542 0.0058101704 0.0722825455 0.0859491521 0.0012390303 -0.0770075031 0.1282886460 0.0001426401 -0.1531951703 0.1102667806 -0.0014990162 -0.1028823627 0.1843213556 -0.0046091213 -0.2448999126 0.0278847909 0.0063197735 0.0096454970 0.0986558052 0.0035620836 -0.1104151582 0.0038916009 0.0083264936 0.0459341908 0.1311044094 0.0031251357 -0.1706976268 -0.0437304100 -0.0044695151 0.0037884841 -0.0548212163 0.0213759187 0.0238427882 -0.0329062166 -0.0097825572 -0.0070419703 -0.0627319099 -0.0307039803 0.0095763446 -0.0234553932 -0.0019754636 -0.0406846106 -0.0370660057 -0.0012690461 -0.0375448126 -0.0076958414 -0.0017913417 -0.0493734425 -0.0317765018 -0.0038645840 -0.0536323804 0.0030303955 -0.0010420038 0.0002288263 -0.0006385541 0.0118254236 -0.0470080442 0.0019207395 0.0105376431 -0.0201655455 0.0078983430 0.0063990319 0.0539297129 -0.0013585282 -0.0006815779 0.0258100716 0.0190273115 0.0016402307 0.0442335201 0.0099903076 0.0039604349 0.0632728329 0.0468327387 0.0017529435 -0.0058198556 0.0333621637 0.0034496664 0.0178983817 0.0648672334 0.0023638176 -0.0379979133 0.0313415927 -0.0016205591 0.0239086421 -0.0213562417 -0.0083053052 0.0076875713 -0.0009087271 -0.0206822147 -0.0241967777 -0.0429976540 -0.0277486059 -0.0510163103 0.0384532372 -0.0301738361 -0.0513163656 -0.0122882332 -0.0009823062 -0.0457925107 0.0403089702 -0.0999472783 0.0309441589 0.0209739793 -0.0726069555 0.0122377914 -0.0200454068 -0.0103551275 -0.0306270079 0.0071623904 -0.0590237718 -0.0080373583 0.0085876575 -0.0490375393 0.0084913788 -0.0128321518 -0.0175951430 -0.0129901843 -0.0157336937 -0.0265475560 -0.0308168631 0.0144195057 -0.0747370995 -0.0065307232 0.0164351667 -0.0562022447 0.0238396541 -0.0197917755 -0.0024248257 -0.0141586962 -0.0165221959 0.0055045960 -0.0412094506 -0.0110513414 -0.0071907376 -0.0226149407 -0.0114850847 -0.0067236470 -0.0215620515 -0.0026220478 -0.0154909859 -0.0218270252 -0.0001172242 0.0013403060 -0.0271139440 -0.0155162466 0.0090316787 -0.0236653161 0.0117263715 -0.0333333972 -0.0226822424 0.0132902004 -0.0241046185 -0.0253590719 -0.0141171620 0.0176504372 -0.0262370519 -0.0271124416 0.0224173251 -0.0231109633 0.0201367817 -0.0487428718 -0.0219946629 0.0229654356 -0.0351481137 -0.0275735004 -0.0248595563 0.0374189645 -0.0267611809 -0.0003936364 0.0084634221 -0.0288791674 -0.0307392678 -0.0135077491 -0.0477478352 -0.0124621737 -0.0151183512 -0.0531793002 0.0376396609 0.0026194243 0.0077877599 -0.0272291168 0.0126195506 0.0162658340 -0.0157936402 0.0029460340 0.0313116404 -0.0026830835 -0.0047863914 0.0345291938 -0.0515413921 0.0093778301 0.0300662547 0.0591955878 -0.0241228472 0.0054622994 -0.0973674746 0.0378862554 0.1363957612 -0.1616109522 0.0230722126 -0.0962745378 -0.0126303179 -0.0000145570 0.0422998822 -0.0033106577 -0.0087147917 0.0530772798 0.1336622298 0.0109249399 0.0756015226 -0.0044870061 -0.0200395098 -0.0033096483 0.1108457185 -0.0799228514 -0.0754425791 -0.0872525829 -0.0143718642 0.2082830106 -0.1647823371 0.1074682478 0.1575150534 -0.0683363829 0.0301602069 0.0833011087 -0.1899999538 0.0295906832 -0.0938092138 -0.1185676694 0.0110597193 -0.1969040722 -0.2537110059 0.0441996120 -0.0864132403 -0.0306867825 -0.0175091492 0.0477165851 0.0155924551 0.0127652503 0.0444584351 0.0115646902 -0.0293093294 0.0748386247 0.0037788822 -0.0052986651 -0.0030141805 -0.0116843092 0.0241545513 -0.0173807005 -0.0153925300 0.0351440521 -0.0183512437 -0.0037864417 0.0182431394 -0.0071128262 0.0144377967 -0.0163329216 0.0094256745 0.0188349185 -0.0292303429 0.0118230339 -0.0217848935 0.0410264886 -0.0269950364 -0.0263298558 0.0560283860 -0.0274690862 -0.0115491277 0.0425504712 -0.0134523799 0.0241007322 -0.0304455044 0.0188767794 0.0334462879 -0.0541619540 0.0241205128 0.1021061062 0.0944546834 -0.0445758903 0.0926024378 0.0812595774 -0.0429579298 0.0225616147 -0.0210609540 0.0083248106 -0.0390081797 -0.1091952398 0.0550633183 -0.0318046815 -0.0955874773 0.0542877450 0.1580447449 0.1782838032 -0.0800825452 0.1383676767 0.1482265079 -0.0786571274 0.0195868773 -0.0277128971 0.0092517042 -0.0912876919 -0.1865703768 0.0918382261 -0.0819907028 -0.1649626026 0.0948024933 -0.0125013322 0.0338239310 -0.0135194742 -0.0177081063 0.0727352861 -0.0187479457 -0.0217731112 -0.0987580852 0.0258827806 0.0600090031 0.0400855453 -0.0086498058 0.0017133746 0.0227570862 -0.0121202323 0.0089071751 0.0207242469 0.0345177813 -0.0088467321 0.0405646843 -0.0552245081 -0.0126204358 0.0570099662 -0.0509444049 -0.0151565153 0.0413044425 -0.0944722066 -0.0228607947 0.0705875062 -0.0869476300 0.0075739377 0.0387646312 0.0432181004 -0.0032601873 0.0564281924 0.0007430892 0.0126607290 0.0388111596 0.0762390106 -0.0062488607 0.0707112120 0.0051964766 0.0189915461 0.0032409659 0.0474570211 0.0426712227 0.0017579245 0.0031362940 0.0161726465 0.0049383769 0.0539345026 0.0403117464 0.0033652416 0.0112546590 -0.0029154914 0.0073977025 0.0857231616 0.0398687520 0.0053065201 0.0144223139 0.0674512484 -0.0002473735 -0.0409575587 0.0672129672 0.0001332172 -0.0396533244 0.0885731250 -0.0019673535 -0.0784669128 0.0877967597 -0.0013326713 -0.0767202627 -0.0401186163 0.0262668800 0.0158820925 -0.0523930631 0.0435499048 0.0162115080 -0.0241448852 0.0331946751 0.0147388354 -0.0519118488 0.0119770751 0.0166957363 -0.0257920831 0.0085104773 0.0123151992 -0.0272387132 0.0159192701 0.0201411408 -0.0136084681 -0.0023906177 0.0125982505 -0.0345108168 0.0064560813 -0.0011202910 0.0161657062 0.0027066387 -0.0075868472 0.0288836722 -0.0159040629 0.0715134079 0.0220059061 -0.0131397000 0.0283714505 -0.0001856650 -0.0050322440 -0.0816840137 0.0103860170 0.0048688330 -0.0485398249 -0.0063439767 0.0080086783 -0.0342126318 0.0035806704 -0.0059666138 -0.0758517571 -0.0270350805 -0.0105584743 0.0575159327 -0.0176790667 0.0057263031 0.0214456426 -0.0358010660 -0.0132507993 0.1076242309 -0.0162401987 0.0203391418 -0.0273646152 0.0262298707 0.0112797023 -0.0331305202 0.0019659840 0.0181670270 -0.0051255287 0.0097380958 0.0117457799 0.0112511108 -0.0094912712 0.0186132378 0.0065821971 0.0326063102 -0.0086575034 -0.0085733517 -0.0400327105 0.0376258165 -0.0477498074 -0.0209379181 0.0231289343 -0.0378493592 0.0246810905 -0.0059012306 -0.0131068662 0.0320585615 -0.0241395631 -0.0074670774 -0.0492416558 0.0505648719 -0.0532304825 -0.0226203528 0.0319440643 -0.0409404118 0.0551842402 -0.0381234283 0.0030997846 0.0567635713 -0.0467817087 0.0068428728 -0.0906422135 0.0845873285 -0.0737254678 -0.0444432730 0.0471379118 -0.0531868975 0.0337154581 -0.0126703113 -0.0070857953 0.0340032926 -0.0064064887 -0.0077022515 0.0348834252 -0.0061286423 -0.0096602084 0.0135299424 -0.0189814033 -0.0013231730 -0.1108803644 0.0139165467 -0.0074406570 0.0021881178 -0.0467473426 -0.0289590543 -0.0284208658 0.0166469352 0.0256827221 -0.0940171970 0.0344843000 0.0226997255 -0.0604172174 -0.0321194699 -0.0324046202 0.0375242392 -0.0753356445 -0.0500898465 -0.0166029304 0.0359086036 0.0503884621 -0.1305136882 0.0662096657 0.0473417274 -0.0705623998 -0.0530862998 -0.0563409918 -0.1604748290 0.0317716379 -0.0110057213 0.1108476720 -0.0858836951 0.0211493933 0.0641738822 -0.0530185779 0.0237279823 -0.0140430398 0.0140620362 0.0254597128 0.0351223104 -0.0148729051 0.0200808471 0.0546584440 -0.0160322149 0.0388126834 0.0719441819 0.0011659037 0.0129427361 -0.0567278754 0.0360934276 -0.0034004564 -0.0832194790 0.0080751575 -0.0112417014 -0.0600953090 0.1333671475 -0.0036623410 -0.1164614873 -0.0347739790 -0.0234046997 0.0778714464 -0.0433044876 0.0926151163 0.1193218664 -0.0702655060 0.1353362160 -0.0935348726 -0.0062150663 -0.0166588984 -0.0766708951 0.0092055406 -0.0317201301 -0.0915211266 0.0050707349 0.0088282115 -0.0471947299 0.1495066975 -0.0031775092 -0.0380671154 0.1497187921 0.0022943450 -0.0978466099 0.1440532974 -0.0254405183 -0.1821191866 -0.0202798100 -0.0161339226 -0.1073555596 -0.0911450670 -0.0435819822 -0.1034690149 -0.0377289337 -0.0247976507 0.0213125698 -0.1016540674 0.1151977511 0.1952093588 0.0089895084 0.1003069121 0.1726889120 -0.1441660620 0.2225318360 0.0156678859 0.0139453866 -0.0014709233 0.0154733249 0.0087516769 0.0043164512 0.0111949773 0.0220654914 0.0025566233 0.0118494630 0.0365701524 -0.0027550313 0.0121934293 0.0423347217 -0.0082390692 0.0147375661 0.0328583582 -0.0086107197 0.0189093143 -0.0035746798 0.0096116110 0.0065710004 0.0236856527 0.0048358350 0.0092502155 0.0486462923 -0.0051021524 0.0100792636 0.0548459497 -0.0135836313 0.0160269808 0.0388205024 -0.0157294713 -0.0085505260 0.0310635578 0.0128648253 -0.0032238465 0.0374079892 0.0023042422 -0.0089389843 0.0222177478 0.0068965179 -0.0143041613 0.0047501865 0.0196380056 -0.0162235814 0.0056673579 0.0268501897 -0.0098912030 0.0411207326 0.0126835708 0.0031618230 0.0513317236 -0.0069242151 -0.0096593538 0.0189185234 -0.0043792716 -0.0168203667 -0.0082533643 0.0225585173 -0.0206470638 -0.0039515172 0.0339610963 0.0081058762 0.0499509380 -0.0054963414 0.0075310768 0.0588000329 -0.0072028490 -0.0503774731 -0.0656252710 0.0120646574 0.0295247398 0.1007039676 -0.0311969954 0.0203897060 -0.0267065171 0.0149914800 0.0007488854 -0.0220526050 -0.0565210338 0.0423027469 -0.0482657657 0.0805045957 0.0428908227 -0.0657376569 0.0693754866 0.0600327296 -0.0512462435 0.1428799660 0.0625826872 -0.0822777542 0.1238080543 -0.0041769674 -0.0414415502 -0.0776139014 0.0166334347 -0.0625012546 -0.0155870516 -0.0213420869 -0.0397331468 -0.1327035340 0.0149339910 -0.0778904339 -0.0290957395 -0.0003272610 -0.0248440425 -0.0525736217 -0.0226073426 -0.0247490832 0.0273147366 0.0057275780 -0.0459277889 -0.0874800753 -0.0106352650 -0.0630563518 -0.0413477467 0.0217348205 -0.0481386623 -0.1416513883 -0.0067970363 -0.0796685343 -0.0685334145 -0.0411837125 -0.0418802029 0.0786797434 -0.0359585780 -0.0598743630 0.0458560418 -0.0598851003 -0.0405322197 0.1457778640 -0.0514301977 -0.0721646731 0.0865976002 0.0111347041 -0.0080663022 0.0294686401 0.0102016349 -0.0001375904 0.0422185283 0.0076236090 -0.0027415718 0.0368003709 -0.0030391365 -0.0142204066 0.0179378477 0.0247715166 -0.0061839597 -0.0047138023 0.0072409587 -0.0104033452 -0.0052473444 0.0343680925 0.0003326572 -0.0133750672 0.0241874943 -0.0045789484 -0.0102007613 -0.0569136116 -0.0090587983 -0.1269641135 -0.0652435917 0.0030779363 -0.1797968479 -0.0571516467 0.0001654218 -0.1412776055 -0.0205364827 -0.0048311544 -0.0263850038 -0.0345718275 -0.0157175704 -0.0649045433 -0.0258412585 0.0088540059 0.0472811058 -0.0206371112 -0.0033022649 0.0195266368 -0.0375368264 0.0027228524 0.0776684384 -0.0428523280 0.0075864309 0.0850913182 -0.0377498915 0.0015424126 0.0947521605 -0.0210975658 0.0211076112 0.0284496781 -0.0235478155 -0.0308804549 -0.0227863147 -0.0221142460 0.0230179829 0.0232099961 0.0152660871 0.0132065317 0.0714910989 -0.0528414703 0.0710788000 -0.0040426467 0.0088307636 -0.0138692112 -0.0042031384 -0.0077536513 0.0495214925 -0.0515692856 0.0011525519 0.0306945605 -0.0387017188 0.0165323729 -0.0121952115 -0.0091275632 -0.0084399812 0.0381117685 -0.0319091297 0.0237108201 -0.0023738104 -0.0292424191 0.0312449786 -0.0231397667 -0.0142607401 0.0013345026 0.0145160897 -0.0154343519 -0.0242770874 0.0616314920 -0.0384285330 0.0346129777 -0.0106523501 -0.0349814843 0.0464429927 -0.0447528405 -0.0074501569 0.0141381871 -0.0262305928 -0.0007804562 0.0120580323 -0.0134221383 -0.0076700247 0.0110332513 -0.0169538421 -0.0004540351 0.0177337991 0.0018791024 -0.0118843155 0.0018137350 0.1317363573 -0.0454003861 0.0103024395 0.0449575291 0.0017483239 0.0230184372 0.0102916120 -0.0390299969 0.0181905868 0.0755000903 -0.0569546979 0.0012169821 0.1135493695 -0.0150838909 0.0048811628 0.0369061121 0.0265527754 0.0265085327 -0.0259437855 -0.0543199312 0.0225895363 0.0854516137 -0.0848885793 -0.0095228861 0.1553854844 -0.0024196034 -0.0100147056 0.1871501809 -0.0590683197 -0.0037554718 0.0193753247 -0.0065028823 -0.0196383872 0.0287985000 -0.0057813983 -0.0472395563 -0.0000474150 0.0781254554 0.0418161239 -0.0182988300 0.0008646173 0.0422422954 0.0072918870 -0.0094270893 0.0655979939 -0.0093127166 -0.0037341378 0.0277014764 -0.0010301582 0.0253037093 0.0534228376 -0.0124695748 0.0189665391 0.0071434264 0.0307608609 0.0673841389 -0.0138174325 -0.0260918208 -0.0037665454 0.0215084187 0.0484615200 -0.0297551450 0.0148878522 0.0819023632 -0.0480781918 0.0807164704 0.0041255026 0.0423691853 0.0159475289 -0.0101383681 0.0092423315 0.0736464289 -0.0478000634 -0.0051013051 0.0202230346 0.0141764848 0.1056140071 -0.0192551284 0.0703925537 0.0794706734 0.0026988016 0.0321477595 0.0362970199 -0.0155897293 -0.0342329491 0.0352377639 0.0021391244 -0.0057849758 -0.0409621135 -0.0520721738 -0.0519838148 -0.0198811309 0.0413088665 0.0866489898 -0.0689870673 -0.0016448533 0.0829807035 -0.0385802092 -0.0004118781 0.1029472724 -0.0526735405 -0.0486021420 -0.0156199442 -0.1049124547 -0.0714610429 -0.0376087958 -0.0628788885 -0.0501293200 -0.0575725536 0.0008053728 -0.0078767269 -0.0498747413 0.0166708210 0.0157011696 -0.0235683779 -0.0278934183 -0.0062538386 -0.0120618210 -0.0859330769 -0.1086207509 -0.0470835929 -0.0758099768 -0.0663453539 -0.0797452123 0.0360266851 0.0143943816 -0.0684477868 0.0913674849 0.0522567293 -0.0181627792 -0.0125505228 0.0119857625 -0.0010621681 -0.1134887796 -0.0521288096 0.0331344243 0.0440025475 -0.0499821610 0.0271639609 0.0096202799 -0.0451578868 -0.0159279605 0.0126679765 -0.0428622215 -0.0546511512 0.0486951805 -0.0441956083 -0.0422223494 0.0802925776 -0.0570723412 0.0697416989 0.0432656631 -0.0505552204 0.0578721430 -0.0188405000 -0.0353669567 -0.0152401345 -0.0322500380 -0.0365387282 -0.0895944327 0.0491095624 -0.0409412504 -0.0671733345 0.1061884834 0.0624174703 -0.0116883642 0.1027133267 -0.0141062567 -0.1407132201 0.1399543159 -0.0284951224 -0.0710065856 -0.0345147955 -0.0350517060 0.0414165213 -0.0661163285 -0.0226768398 0.0023228380 -0.0644559855 -0.0046498924 -0.0006983077 -0.0143421675 0.0172454363 -0.0007990860 -0.0004018459 0.0840040196 -0.0102921645 0.1193912671 0.0023000958 0.0020871265 -0.0338242797 0.1233970335 -0.0144931207 0.1838214393 0.0485376257 -0.0082139011 0.0743667113 0.0980920808 -0.0125904644 0.1525754423 0.0609084878 -0.0108537383 0.0904596878 0.1478519272 -0.0164412303 0.2379924269 -0.0120582561 -0.0062886504 0.0095556409 -0.0154900861 -0.0052492699 0.0230609866 0.0151580819 -0.0080427747 -0.0343004216 0.0547803659 -0.0136246084 -0.1020440830 0.0102094736 -0.0067245252 -0.0200321445 0.0806191466 -0.0175944991 -0.1466340199 0.0203135265 -0.0104386080 -0.0394304486 0.0609825186 -0.0146530701 -0.1122010535 0.0202338082 -0.0104589959 -0.0369405220 0.0942506142 -0.0185333503 -0.1707450818 0.0337628729 -0.0024111966 -0.0046204461 0.0286606816 0.0024963436 -0.0087026273 0.0399301513 0.0063802617 0.0012380265 0.0278132484 -0.0049806656 -0.0093867348 0.0425045113 -0.0189357422 -0.0009546895 0.0349446285 -0.0131204853 0.0060133417 0.0469865987 -0.0229001708 -0.0010884850 0.0378979895 -0.0158258523 -0.0115037005 -0.0068957218 -0.0127714336 -0.0097407287 -0.0511055857 0.0032614198 -0.1153982658 -0.0286165107 -0.0033701058 -0.0606942768 0.0285806127 -0.0188168689 0.0680365258 0.0157280132 -0.0194039850 0.0391807975 0.0156537989 -0.0399486690 0.0051098347 0.0169263618 -0.0146398278 0.0489035793 0.0075963861 -0.0046125195 -0.0825571715 0.0079751122 -0.0378241649 -0.0480724020 -0.0027810944 -0.0005754065 -0.1272462039 0.0232876770 -0.0580526976 0.0089169322 0.0105733391 -0.0178425475 0.0313712282 0.0136152476 -0.0449666341 0.0055662008 -0.0056898528 -0.0342057036 -0.0272580440 0.0322612281 -0.0650501527 0.0114755082 0.0174474339 -0.0087816506 -0.0152274233 -0.0282107569 0.0123514636 -0.0300665704 -0.0159832262 0.0057908350 -0.0255884024 0.0106318848 -0.0063392273 -0.0160203468 0.0054161938 -0.0124861922 -0.0173212535 -0.0201380865 0.0138151502 -0.0266546472 -0.0054039678 0.0061211049 -0.0213608503 0.0196321058 -0.0199204800 -0.0121634610 0.0113836398 -0.0210682725 -0.0148223822 -0.0344858948 0.0254494851 -0.0313583933 -0.0090416215 0.0101079174 -0.0224608805 0.0150355769 -0.0030986879 -0.0182121492 0.0139064965 0.0012216117 -0.0205638911 0.0170461155 -0.0070955043 -0.0145006276 0.0047393480 0.0051571402 -0.0206701823 -0.0829215783 0.0958641619 -0.0437523807 0.0103373124 -0.0143196190 -0.0246994655 -0.0332008753 0.0538373270 -0.0256508237 -0.0782859417 0.0993353700 -0.0366374765 -0.0346688500 0.0323538142 -0.0361910037 0.0432613051 -0.0547775167 -0.0205030372 -0.0335380234 0.0648747669 -0.0202387245 -0.1101775612 0.1404137876 -0.0389969459 -0.0337185711 0.0239530407 -0.0399345728 -0.1205859518 0.1387443862 -0.0537949912 0.0420779085 -0.0383908533 -0.0024032596 0.0386780813 -0.0462371809 0.0014569519 -0.0072302381 -0.0537114220 -0.0339708696 0.0025332044 -0.0147312305 -0.0022842959 0.0203766166 0.0057459887 0.0051823211 0.0404776622 0.0285933771 -0.0294613388 -0.0476412475 0.0484800652 0.0059301417 -0.0772307036 0.0827521315 0.0243272107 -0.0402020443 0.0908599717 -0.0149638197 -0.0676529935 -0.0436135213 0.0422105680 0.0339015505 -0.0018178268 0.0553099421 0.0760896402 -0.0057449699 0.0892550262 -0.1260609850 0.0317366997 -0.0093579606 0.0044577848 0.0779175576 0.0340889433 -0.1135208769 0.1561027991 0.0617994229 -0.0365160021 0.1256933981 -0.0492450731 -0.0092982211 0.0593448042 -0.0247799205 -0.0729075876 0.0996836344 0.0061480975 -0.1041722838 -0.0457031440 0.0918196302 -0.0696350868 -0.0582791801 0.0474299352 -0.0426170998 -0.0902116523 0.0155997534 0.0126446471 -0.0271573557 0.0685962551 0.1385202828 0.0546351082 0.0601484672 0.1093090619 -0.0520030063 0.1651217678 -0.0069854615 -0.0132475617 -0.0088970566 -0.0159960713 -0.0062291067 -0.0079182309 -0.0105297612 -0.0136724862 0.0040062269 0.0005808964 -0.0249940731 0.0132556525 0.0063718652 -0.0249217034 0.0085668900 0.0028517489 -0.0223829188 -0.0009666087 -0.0282811748 0.0040223018 -0.0162916553 -0.0157240931 -0.0109815200 0.0061526826 0.0091946750 -0.0426306135 0.0308570043 0.0162940961 -0.0321332596 0.0158549408 0.0081452074 -0.0272931777 -0.0007971320 -0.0353206677 -0.1256434793 0.0187265309 -0.0248618907 -0.1049520382 0.0395066455 0.0114105627 -0.0147692216 0.0080920608 0.0280452992 0.0418306515 -0.0343264774 0.0190602250 0.0172994181 -0.0541763699 -0.0571644894 -0.1948866452 0.0357991944 -0.0398225811 -0.1512094803 0.0733245724 0.0353642701 0.0318872308 0.0198329421 0.0505823600 0.1090022031 -0.0538158680 0.0377504017 0.0648126385 -0.0902242368 0.0172671207 -0.0238775262 0.0326413283 0.0083030503 -0.0774634102 0.0434530433 0.0469236575 0.0866272698 0.0149078238 0.0438867594 0.0176346356 0.0334924129 -0.0199020054 -0.0026035290 -0.0406766396 0.0237819727 -0.0120024506 0.0489810342 -0.0572102840 0.0082328243 -0.1127797059 -0.0410733541 0.0088686745 -0.0817100500 -0.0992644335 0.0165689427 -0.1934195262 -0.0715162992 0.0177320458 -0.1401027993 0.0487758663 -0.0106714217 0.0940084588 0.0175463622 -0.0004143002 0.0324639014 0.0913376003 -0.0169908856 0.1673517814 0.0358330179 0.0028755158 0.0670234876 0.0081084564 0.0221892265 0.0337159603 0.0095512252 0.0244175045 -0.0443371766 0.0022504211 0.0605648576 0.0898957221 -0.0065233481 0.0968558214 0.0719311358 0.0039236723 0.0606118454 0.1414130608 -0.0127119360 0.1260794761 0.1189228863 0.0050637649 0.0615202004 -0.0716250060 -0.0032686726 0.0963252070 -0.0116583283 0.0050338727 0.0618977032 -0.1381045421 -0.0075779394 0.1231155353 -0.0293528857 -0.0239214013 -0.0220256450 0.0167257736 -0.0239983045 -0.0099537086 0.0399315887 -0.0296558818 -0.0273418105 0.0144361266 -0.0390812522 -0.0354448777 0.0125242771 -0.0106903853 -0.0039094620 -0.0351977761 -0.0331226744 -0.0118164958 -0.0388073724 -0.0029239607 0.0103306260 -0.0472789233 -0.0078603714 -0.0010771283 -0.0379045561 0.0369828757 -0.0222070580 0.0664666338 0.1108411817 -0.0211294610 0.1493309177 0.0706791432 -0.0106092812 0.1003583309 -0.0419175985 0.0092192468 -0.0162986758 -0.0191429516 -0.0066859223 0.0130815370 -0.0269605770 0.0161595307 -0.0202091357 -0.0428130865 0.0028399347 -0.0201707179 0.0481208230 -0.0113478319 -0.0674779895 0.0271958867 0.0153644326 -0.0534613581 0.0828085854 -0.0128665209 -0.0898818946 -0.0472746633 0.0305970025 0.0076462249 -0.0303951276 -0.0151652983 0.0064339679 -0.0283294498 0.0062822057 0.0197386163 -0.0189910041 -0.0008107006 0.0392424751 -0.0343895439 0.0138550591 0.0157833651 -0.0232597680 -0.0389562233 -0.0116613264 0.0132522109 0.0208865417 -0.0600767927 0.0075062758 0.0068078661 -0.0504031613 -0.0112544028 -0.0263975527 -0.0263765892 0.0083170974 0.0041371680 -0.0272909534 0.0008535251 -0.0101717103 -0.0604246712 -0.0077881753 -0.0275012689 -0.0471089916 -0.0002161761 -0.0136017803 -0.0142459421 0.0153653765 0.0154387598 -0.0178727266 0.0026253072 -0.0105154371 -0.0782049487 -0.0128658971 -0.0403230668 -0.0539893601 -0.0203615862 -0.0358762720 -0.0204874241 -0.0209780654 -0.0189235941 -0.0255724160 -0.0252194472 -0.0160857559 -0.0201917801 -0.0027617216 -0.0127770679 -0.0279486240 0.0305058732 0.0888423477 -0.0562150227 -0.0013972310 0.0296629132 -0.0047611224 0.0151908994 -0.0144807379 -0.0640470820 0.0353321643 0.0365715617 -0.0789021933 0.0146236375 0.0845561710 -0.0182706305 -0.0168172014 0.0299834233 0.0256060561 0.0094897404 -0.0467159130 -0.0880502122 0.0498838556 0.0380525945 -0.1143711752 0.0118668913 0.1255869925 0.0030770097 0.0382258945 0.1319837955 -0.0671032453 0.0048478317 -0.0175442673 0.0099945650 -0.0149147085 -0.0138053253 0.0150255659 0.0422984842 0.0364996034 -0.0521795294 0.0075019049 -0.0043819497 0.0155293872 0.0142180808 0.0412719181 0.0026440972 0.0521266058 0.0272822050 -0.0004842319 -0.0294518257 0.0496514951 0.0165106634 -0.0479991450 0.0235285280 0.0085833066 -0.0407599075 0.0860718769 0.0376138911 -0.0665378386 0.0173419692 -0.0016415537 -0.0171717361 0.1071447734 -0.0142589757 -0.0112053883 0.1612364915 -0.0310647904 -0.0576026033 0.0076780602 0.0045885199 -0.0469292437 0.0243619429 -0.0163591805 -0.0545483464 0.0124044230 0.0288347883 -0.0371020708 0.0765419256 0.0531068891 -0.0526760465 0.0999272896 0.0419575577 -0.0440686034 0.0863414833 0.0243315010 -0.0676041626 0.0099015066 0.0340099653 -0.0536398199 0.0377421510 -0.0315799887 -0.0974219526 -0.0064801099 -0.0164470317 0.0387921345 0.1726831034 -0.0524180120 -0.0269959207 0.1508742845 -0.0229735724 -0.0417047465 0.2029744660 -0.0321899400 0.0464578432 -0.0465182426 0.0676922430 0.0551918119 -0.0325361480 0.0466149022 0.0528190499 -0.0394160066 0.0289638040 0.0465401658 -0.0654968870 0.0360341736 0.0384524318 -0.0798514064 0.0566501177 0.0400327213 -0.0687628710 0.0715792381 0.0651508040 -0.0120750844 0.0442981065 0.0544525536 -0.0222104515 0.0111899952 0.0463199657 -0.0848398239 0.0210688233 0.0310729081 -0.1002984392 0.0602478751 0.0349391628 -0.0761600875 0.0840257042 0.0343116218 0.0098398625 -0.0316707316 0.0184733230 -0.0072047759 -0.0091384175 0.0136539060 0.0040646151 -0.0081291820 0.0316904338 0.0444859347 -0.0352389802 0.0474668078 0.0604759970 -0.0572955702 0.0359184091 -0.0065393033 -0.0309833400 0.0069198669 -0.0353335766 0.0101163534 -0.0186805684 -0.0391710602 0.0273121600 0.0277877429 0.0558573636 -0.0342929602 0.0581548583 0.0845013338 -0.0749320795 0.0251806154 -0.0615775179 0.0146002240 0.0713373210 -0.1290614885 0.0161130268 -0.0493966252 -0.0522445753 0.0394783282 -0.0152170223 -0.0623011504 0.0433319697 0.0419512771 0.0160033148 0.0551145978 -0.0261533540 0.0294855929 -0.0158261099 0.0751004645 0.0383404196 0.0699063878 0.0259968651 0.0769131295 0.0032215882 0.1380810124 0.0246728006 0.1286177217 0.0481463388 0.0932151710 0.0105324882 -0.0761392173 0.0693910896 -0.0785453727 -0.0530323868 0.0915008346 -0.0776238759 -0.1376024720 0.0807583716 -0.1271031791 -0.0950835470 0.1174424383 -0.1342892961 -0.0342400930 -0.0287447895 -0.0144831026 0.0151428400 -0.0351663332 -0.0355872494 -0.0834457304 -0.0620005403 0.0198869238 -0.0827299535 -0.0966947285 0.0501843786 -0.1260169757 -0.0570937426 0.0266817077 -0.1231942649 -0.1174706807 0.0852887561 0.0225042586 -0.0725362255 -0.0139026476 -0.0296846365 -0.1028429508 0.0322639824 0.0682728062 -0.0766682020 -0.0276588074 -0.0279942442 -0.1293720376 0.0546884041 -0.0162467340 0.0231099351 0.0117467815 -0.0340048529 0.0470573667 0.0107964479 0.0050208217 0.0368900864 0.0149133972 -0.0357201451 0.0033809292 0.0089832506 0.0133131426 -0.0148754724 0.0091867608 0.0111691142 -0.0097662809 0.0140867391 0.0195969528 -0.0191657948 0.0081334257 0.0057268532 -0.0173906040 0.0012981704 -0.0169829493 -0.0446360077 -0.0363579799 0.0304711367 -0.0184108514 -0.0732655832 0.0052503692 -0.0131840781 -0.0531273558 -0.0529194359 -0.0042152567 0.0091710382 -0.0456062326 -0.0362891802 -0.0110456106 -0.0484553211 0.0050629268 0.0266980332 -0.0649005822 -0.0061198303 0.0361652041 0.0226469021 -0.0116192454 -0.0529273207 -0.0067132817 0.0049092129 -0.0101258130 0.0587069971 -0.0119707506 -0.0941330462 -0.0549997430 0.0195187434 0.0301856129 -0.0548317655 -0.0537975858 0.0019728334 -0.0430461183 -0.0274849492 0.0152501873 -0.0547642450 -0.0510663292 0.0393194199 -0.0196929053 -0.0190070761 -0.0158199283 0.0183129533 -0.0376634064 0.0133551051 0.0405409685 -0.0146042457 0.0010321727 0.0308612985 -0.0133306521 0.0002098487 0.0107957530 -0.0155094668 0.0028802474 -0.0065291606 0.0189994426 -0.0136333820 0.0534242327 -0.0403450185 0.0108483387 0.0404211847 -0.0385207498 0.0105162220 -0.0178886463 0.0181462791 -0.0132565036 -0.0278530310 0.0442562538 -0.0243100743 0.0787408816 -0.0609094132 0.0181477440 0.0533692331 -0.0508795315 0.0166581873 0.0140264814 -0.0295389022 0.0141161322 0.0193236440 -0.0088997144 0.0108181241 0.0072712422 0.0139502551 0.0016567978 0.0197078798 -0.0132908839 0.0150138415 0.0173299953 0.0063536201 0.0129748015 0.0173977359 -0.0031427464 0.0173813921 0.0183853592 -0.0118540738 0.0136796985 0.0190528259 -0.0017983189 0.0108904103 0.0165445896 0.0062948599 0.0151855799 0.0166904127 -0.0043578869 0.0219877724 0.0148414825 -0.0091546719 0.0133256900 0.0201389657 0.0002882803 0.0046601826 0.0139363619 0.0121255877 0.0156215871 0.0154174687 0.0132077859 0.0113187064 -0.0578882681 0.0522446981 -0.0265920100 -0.0368726661 0.0352881845 -0.0274055458 0.0045839031 0.0220699285 -0.0120889471 0.0772645372 0.0188708415 0.0229403572 0.0591727949 -0.0200181336 0.0271729339 0.0198844434 -0.0032328672 0.0269736510 0.0100965514 0.0047722288 -0.0327640015 -0.0670719507 -0.0268429885 -0.0399104652 0.0331919219 0.0438519144 -0.0906600812 0.0443718348 0.0084431346 0.0007705016 0.0908118680 -0.0832811682 0.0386810136 0.0814895957 -0.1336119031 0.0519770579 -0.0918354540 -0.0267359480 -0.0681205443 -0.0735958192 -0.0252356906 -0.0573905256 -0.0836474446 -0.0425697931 0.0055575007 0.0286991142 0.0505493463 -0.1034043657 0.0712853748 0.0519203966 -0.0868520060 0.0107664605 0.0496334167 -0.1096509707 0.0112450499 0.0309954550 -0.0646406828 0.0208295849 -0.0593862583 0.0567058106 0.1211655219 0.0528417206 0.0288247543 0.0018753016 -0.1570192206 0.0488249818 0.1080402845 -0.0861659713 0.0414512913 0.1293571979 -0.1992017735 0.0753622233 -0.0047973153 -0.0674700219 -0.0188382282 -0.0241864641 -0.0695031632 0.0006293423 -0.0344292576 -0.0306080027 0.0121229657 -0.0235601716 0.0079962759 0.0029231089 0.0075502800 -0.0152015097 -0.0023642854 0.0168807007 -0.0573944863 -0.0117234105 -0.0383213192 -0.0921423853 0.0016598468 -0.0520272438 -0.0229130945 0.0210721561 -0.0498032276 0.1020994398 -0.0075571096 0.0200065889 0.0111625483 -0.0056182232 0.0366597507 -0.0678353986 -0.0188376020 -0.0190670415 -0.0133414427 0.0087062283 -0.0198595446 -0.0126248981 0.0111133236 0.0047458282 0.0247068114 -0.0071067817 0.0346649225 0.0678038670 -0.0301794795 0.0342889834 0.0652527124 -0.0321375149 -0.0377245680 -0.0445151785 0.0209886761 -0.0401550258 -0.0434661174 0.0280696170 -0.0103414178 0.0046390723 0.0023847416 0.0536606186 0.0972757991 -0.0436798586 0.0553700854 0.0945628872 -0.0495083915 -0.0541906930 0.1151744911 -0.0097103350 -0.0703067945 0.1751597513 -0.0158129713 -0.0017204234 0.0253725589 -0.0010270714 -0.0313464108 -0.0348605480 0.0139911619 0.0061493146 0.0240666871 -0.0275208654 -0.0246331532 0.0302895125 0.0035220967 0.0516001768 0.0587235665 -0.0135406367 0.0646358045 0.0987290170 0.0381435167 0.0814238232 0.0512516045 -0.0390009517 0.1019687667 0.1224971441 0.0563204787 -0.0184978596 0.0745720746 0.0428307525 0.0291042018 0.1067851151 0.0636120333 -0.0486918347 0.0811739427 0.0586824161 0.0374217104 0.1380366509 0.0996975892 -0.0538628160 -0.0230875705 0.0259844536 0.0050182057 -0.0285833032 -0.0411813169 -0.0901688872 -0.0397188089 0.0610290202 -0.0521689327 -0.0633702383 0.0119696299 -0.1469080647 -0.0323111152 0.1198351945 -0.0782806444 -0.0728591045 0.0396152221 0.0496324849 -0.0544739073 -0.1008418260 0.0229913238 -0.0724359854 -0.0804864110 0.1069079592 -0.0594153878 -0.1626641557 0.0585982391 -0.0909354210 -0.1292698366 0.1102737879 0.0436569365 -0.0104488476 0.0848791322 0.0570360574 -0.0529004323 0.1571051240 0.0617269579 -0.0161108318 0.1181775382 0.0366178943 0.0094200994 0.0826255762 0.0275628137 0.0639176476 0.1022053089 0.0335271813 0.0658837108 0.0627588190 0.0181981103 0.0792668686 0.0879720886 0.0302734862 0.0705192177 0.0048819367 -0.0097794436 -0.0077492575 0.0131028951 -0.0041818595 -0.0213917641 0.0073825633 -0.0030545233 -0.0165598369 0.0021745007 -0.0036581697 0.0016721785 0.0033369480 -0.0084057836 -0.0017275983 -0.0026965950 -0.0058726855 0.0002552169 -0.0024713943 -0.0036994259 0.0028596782 0.0115271406 -0.0025491440 -0.0334288492 0.0055416626 -0.0059670874 -0.0170464723 0.0159050756 -0.0019167432 -0.0481579957 -0.0105265328 -0.0031432058 0.0146184362 0.0083334791 -0.0103899352 0.0080678261 -0.0028438653 0.0043762368 0.0294237011 0.0198063547 0.0027461964 0.0524603285 -0.0236035385 0.0216919971 0.0279736520 -0.0097326851 0.0131055271 0.0280294739 -0.0695873110 0.0534102152 -0.0032094176 -0.0449040894 0.0347631177 0.0095579413 0.0042420493 -0.0032716266 0.0312868577 -0.0561931254 0.0458978149 -0.0025675509 0.0017836167 -0.0034367902 0.0371717052 0.0246953483 -0.0198844806 0.0480926840 -0.0263308030 0.0216732491 0.0132112310 -0.0889353270 0.0703835770 -0.0232760568 0.0173652095 -0.0163644140 0.0467076651 0.0550847734 -0.0384836658 0.0658164015 -0.0032481066 0.0006629730 0.0256698316 -0.0171783122 0.0182786623 -0.0075201355 -0.0088803881 0.0038094796 -0.0066518441 -0.0216801581 0.0140988752 -0.0054766205 0.0904012283 -0.1634660236 0.0379477313 0.0039426508 -0.0267679408 0.0005737231 -0.0101101124 -0.0033523256 0.0027057597 0.0472761377 -0.0943442816 0.0249879648 0.0617554964 -0.1182756779 0.0237215597 -0.0084697193 -0.0076529305 -0.0085904855 -0.0356444463 0.0361692579 -0.0036480611 0.0633326498 -0.1196059202 0.0347587806 0.0936374217 -0.1680851892 0.0300592858 0.1446081008 -0.2480272139 0.0581810927 -0.0343815292 0.0295196493 0.0139777211 -0.0239459045 0.0171388977 0.0152481696 -0.0001929961 -0.0117440886 -0.0093758818 -0.0059395615 -0.0391869624 -0.0782710194 0.0349539770 0.0087396610 -0.0729428011 0.1164276550 -0.0142454472 -0.0848370714 -0.0051380979 0.0062239023 0.0037526117 0.0109271931 0.0467728900 0.0222549830 -0.0290898496 0.0335800772 0.0539095335 -0.0786684743 -0.1164364829 0.0023040378 0.0072040924 0.0782585451 -0.0469924581 0.0747053209 0.1060092242 -0.0080899283 0.0013255912 0.0282981518 0.0185580487 0.0385233035 0.0442367872 0.0316407408 0.0034847657 0.0756178710 0.0216310042 0.0009549099 0.1164205475 0.0049178482 -0.0316953849 -0.0817722420 0.0163230849 -0.0747395336 0.0467109942 0.1702622365 -0.1001842835 -0.1402157855 0.1332408424 -0.0528190845 -0.0722695715 -0.0582447461 -0.1317592135 -0.2196556137 -0.0595361265 0.0834578857 0.1084454870 -0.0067454880 0.1242326738 0.1087911497 -0.0357526218 0.0620902203 0.1223636015 0.0495099376 0.0065769182 -0.0087496126 -0.0009547697 0.0259483017 -0.0707519472 0.0417654326 0.0192064456 -0.0505567910 0.0412165251 -0.0100235863 0.0355147558 -0.0023906156 -0.0275796756 0.0924627859 -0.0405762789 -0.0194300792 0.0653386974 -0.0369289490 0.0436779091 -0.1341845023 0.0693547667 0.0329472644 -0.0933974821 0.0683794053 -0.0205875685 0.0714991510 -0.0090038355 -0.0502669538 0.1595529809 -0.0751137413 -0.0362304973 0.1074937662 -0.0653384032 -0.0075801087 -0.0308734427 0.0042344598 -0.0105895384 -0.0331834452 0.0127514162 -0.0078937433 -0.0204930809 0.0096943268 -0.0062320435 -0.0094616455 0.0005013080 -0.0006416352 -0.0043097369 -0.0096552706 -0.0086360680 -0.0431710086 0.0058156517 -0.0143235442 -0.0432109497 0.0195908810 -0.0018073771 -0.0092011659 0.0115713558 -0.0067363048 -0.0009455319 -0.0000038036 0.0044217581 0.0072333403 -0.0180595606 -0.0701564903 0.2381517350 -0.0292049475 0.0172481585 -0.0651342396 0.0059961136 -0.0363769395 -0.0594329282 0.0253510439 0.0387814463 0.0523595037 -0.0026296099 0.0067866584 0.0032049741 -0.0144251268 0.0064799745 0.0032247528 -0.0012305095 0.0095871782 0.0103965875 -0.0218185825 0.0127518260 0.0172254276 -0.0114257498 0.0101978878 0.0099857894 -0.0349543653 0.0145819714 0.0221164809 -0.0162939123 0.0106623105 0.0108466253 0.0110634840 0.0144964850 0.0173649677 0.0066502752 0.0109097300 0.0112426753 0.0233969642 0.0181423201 0.0226812100 0.0167248704 -0.0033823696 -0.0005502254 0.0012217793 0.0064981892 -0.0010966191 -0.0209072253 -0.0168371275 0.0024403198 0.0254566197 -0.0208820753 0.0043345235 0.0309858230 -0.0258116002 0.0035358513 0.0404939441 -0.0330304376 0.0073970049 0.0534784014 0.0063420491 0.0002273822 -0.0220463517 -0.0082131621 0.0027683300 0.0054075570 0.0158594953 -0.0005359256 -0.0414886656 -0.0100422769 0.0040203710 0.0076420384 -0.0477119862 -0.0747617139 -0.0320176944 -0.0502942101 -0.0447827758 0.0188108015 -0.0556029678 -0.0991078678 -0.0523968589 -0.0739435629 -0.1103975100 -0.0238052598 -0.0114208074 -0.0526714641 -0.1284287426 -0.0378335564 -0.0547397610 -0.1260225227 0.0126186843 -0.0462977873 -0.1442347632 -0.0247869149 -0.0567752564 -0.1430436710 -0.0176133416 0.0134751544 -0.0108248133 -0.0499783513 0.0118825028 -0.0390976055 -0.0332631790 0.0076586712 -0.0250909686 0.0072252595 -0.0002603771 0.0026768298 0.0005577779 0.0088925479 -0.0001940130 0.0074262529 -0.0013826996 -0.0159897895 0.0090574629 0.0028397181 -0.0077711689 -0.0084326739 0.0082149334 -0.0128083230 -0.0025911137 -0.0012073989 -0.0131212536 -0.0202309241 0.0089713827 -0.0087040479 0.0097407965 -0.0036268523 -0.0195025102 0.0061075808 0.0170752271 -0.0029281220 0.0086392180 0.0009454489 -0.0192364062 -0.0060619644 0.0049372299 -0.0384683801 0.0201821833 -0.0215642935 -0.0027899251 0.0116811758 -0.0448884603 0.0253873847 0.0450627618 0.0212397352 -0.0233386974 0.0355920671 0.0084162196 -0.0145374492 0.0145331549 -0.0259863293 0.0145868079 0.0128912787 0.0249577077 -0.0013414077 0.0431959278 -0.0211428568 -0.0165509511 0.0308061401 -0.0373015272 -0.0045974071 0.0016689274 0.0083272314 0.0112173829 0.0047262346 0.0531630480 0.0001730353 0.0564929894 -0.0310139021 -0.0282548259 0.0322402211 -0.0568650206 -0.0094713620 0.0130044437 -0.0518336932 0.0352457173 0.0152715589 -0.0529002324 0.0448530826 0.0157889795 -0.0572196207 0.0518737191 0.0213516022 -0.0431882797 0.0429181604 0.0383756616 -0.0211843019 0.0403759797 -0.0274394237 0.0424816814 0.0342159486 0.0710530867 -0.1071593172 0.0503116700 0.0815233819 -0.0980322819 0.0483393921 -0.0196622707 0.0540323875 0.0313726492 -0.0720190819 0.0965710303 0.0301594282 0.0999338016 -0.1558479375 0.0552008359 0.1209495769 -0.1487920620 0.0513043782 -0.0614364746 0.1217949075 0.0240163526 0.0448945595 -0.0158966517 0.0389568633 -0.0216276127 0.0269627159 0.0133359988 -0.0045074197 0.0125866379 0.0143994656 -0.0068111314 -0.0005709024 0.0001689800 0.0250979015 -0.0620232263 0.0540690597 0.0190251263 -0.0148955288 0.0243893976 0.0447656473 -0.0201295930 0.0214310091 -0.0269351117 0.0015434485 -0.0341914747 -0.0836174856 -0.0490747835 -0.0491732832 -0.0159666889 0.0675929641 -0.0676833795 -0.0253400218 0.0095355285 -0.0364159479 -0.0192276412 0.0571483359 -0.0097598348 -0.0596003162 0.1670082312 -0.0846614186 -0.1032707282 -0.0595948826 -0.0662832306 -0.0879289783 -0.0464103068 -0.0813919674 -0.0989319158 -0.0624424349 -0.0083496285 -0.0105312225 0.0930812386 -0.0882114700 0.0194210139 0.0560219115 -0.0699238276 -0.0513942463 0.0777763569 -0.0603629605 -0.0267621720 0.0144409984 -0.0562884277 -0.0285187706 0.0023878212 -0.0284310745 -0.0177000694 0.0272547015 -0.0258673240 0.0137371285 0.1776816749 -0.1637828267 -0.1255012998 0.1876921646 -0.0447638363 -0.1004528774 0.2230373668 -0.1036116126 -0.0160658744 0.0090153718 -0.0095709222 -0.0206206219 0.0274492059 -0.0239840128 -0.0161461003 0.0153867561 -0.0234515807 -0.0070869163 -0.0187820611 -0.0076517432 0.0031101883 -0.0511443515 0.0132208347 -0.0025471245 -0.0324552722 0.0099605236 -0.0293146111 0.0552891839 -0.0363982502 -0.0192906470 0.0325139414 -0.0361091377 -0.0157089357 -0.0002961205 -0.0244220252 0.0121759196 -0.0808712541 0.0280959440 0.0031965945 -0.0498023678 0.0228822867 -0.0429425827 -0.0649629375 0.0422499387 -0.0301634738 -0.0439266470 0.0470672405 0.0060872185 0.0262662062 0.0175956673 0.0364469537 0.0813855897 -0.0161814700 0.0346817073 0.0730761792 -0.0284784139 -0.0767267209 -0.1296578847 0.0650267031 -0.0515534788 -0.0847637647 0.0721318495 0.0069303124 0.0348671267 0.0225725797 0.0613035124 0.1333696428 -0.0348599112 0.0652753701 0.1250074431 -0.0623283645 0.0065919796 -0.1279722089 -0.0136117851 -0.0455742078 0.1478310292 -0.0504119489 -0.1113671908 -0.1461701182 0.0700647599 0.1248000355 0.2222462797 -0.0232211579 -0.0259386483 -0.0055984032 -0.0160662206 0.0010326893 -0.0112056540 0.0062954224 -0.0449324520 -0.0178658533 -0.0247931349 -0.0274639270 -0.0367507555 -0.0042623776 -0.0728799168 -0.0116835834 -0.0450764965 -0.0401706146 -0.0450724754 -0.0100566109 0.0211913696 -0.0312946990 0.0291489125 0.0077443168 -0.0433491943 0.0273859982 0.0492607324 -0.0366170324 0.0474277505 0.0244552975 -0.0565721203 0.0479017595 0.0044322077 0.0145735104 -0.0071591223 -0.0039701556 0.0161064827 -0.0120071321 0.0079618001 0.0270732127 0.0029277195 -0.0002753701 0.0394285234 0.0068665962 0.0169885381 0.0260353340 0.0077888312 0.0013218454 0.0475210096 0.0148431872 -0.0122862285 0.0292740334 -0.0093623975 -0.0098963501 0.0405101069 0.0011102802 -0.0222666601 0.0302154580 -0.0149255497 -0.0162896786 0.0493684144 0.0045301185 0.0192526902 -0.0582204988 0.0547813001 0.0208063283 -0.0589185985 0.0581674104 0.0147929568 -0.0575857771 0.0578361102 0.0158670005 -0.0577872183 0.0506767959 0.0360159710 -0.0751337480 0.0651388382 0.0403220847 -0.0430049854 0.0953005414 0.0513441076 -0.1145010331 0.0791453470 0.0185100090 -0.0694304201 0.0281067608 0.0061814252 -0.0116570319 0.0045302793 0.0293500802 -0.0103986969 0.0266491124 0.0182379807 -0.0075518704 0.0165325836 -0.0106997176 -0.0022540750 -0.0048272862 -0.0075312554 -0.0076419772 -0.0035250303 -0.0044331417 -0.0009786490 -0.0010997272 -0.0091599008 -0.0040562583 -0.0011540571 0.0011058338 -0.0059960323 -0.0024053131 -0.0014172170 -0.0014077987 -0.0027120959 0.0069638353 -0.0064351426 -0.0034677445 -0.0036027063 -0.0003478837 -0.0005960092 -0.0123431166 -0.0114178484 -0.0046800073 -0.0037369985 0.0031707405 -0.0005198576 0.0023719689 0.0046446041 0.0029980745 -0.0034078491 0.0145507913 -0.0128395305 0.0289390668 0.0494385240 0.0252267640 -0.0457040985 0.0129596223 0.0557960673 -0.0252396969 0.0148749589 0.0544744568 0.0248359432 0.0219366889 0.0485583683 -0.0454848721 0.0351697111 0.0183348550 0.0202327052 -0.0004119884 0.0870437496 0.0422495460 0.0063956205 0.0807842908 -0.0188704171 0.0364806338 0.0158933246 -0.0823768218 0.0488021893 -0.0092046396 0.0345550074 -0.0134652064 0.1136571072 0.0709362788 0.0061912226 0.1009618570 0.0319472572 0.0266520621 0.0438243559 0.0219139099 0.0378464598 0.0210997104 0.0352276329 0.0089462435 0.0363843925 0.0023973897 0.0538534860 0.0209446291 -0.0506968656 0.0535091782 0.0253145418 0.0225815988 0.0010245198 0.0179781405 -0.0421590108 0.1027980169 0.0283413595 -0.0715737515 0.1046577882 0.0301415861 -0.0020032507 -0.0043530724 0.0198013137 0.0587007988 -0.0370255246 0.0122941188 -0.0529060929 0.1404698805 0.0372832230 -0.1070538016 0.1451634196 0.0370016512 0.0131800580 -0.0439383485 0.0140912134 -0.0711424196 0.0564324089 0.0250326315 -0.0418254125 0.0570509172 -0.0168638729 -0.0131279608 0.0463703812 -0.0223554532 -0.0042234288 -0.0061740254 -0.0047732212 0.0145786209 -0.0555637443 -0.0672943656 0.0427953708 -0.0078704746 -0.0714106018 0.1032404036 -0.0196847695 -0.0883842505 0.0146007837 -0.0093550223 0.0212357932 0.0536259733 0.0435202234 0.0417039774 -0.0106339215 0.0185329529 0.0741501622 -0.0602741753 -0.1481989983 0.0276706854 0.0231908548 0.0435845628 -0.0501244176 0.0737833347 0.0667552902 -0.0224810917 0.0582804434 0.0276440628 0.0525010122 0.0787291970 0.0405162736 0.0579674962 0.0570977604 0.0699180969 0.0190179381 0.0104550281 0.0502990035 0.0692080075 -0.0268759369 -0.0135693401 0.0627719080 -0.0354727576 0.0256330309 0.1077897530 -0.0805017761 -0.1786170980 0.1863145580 -0.0332594451 -0.0935168467 -0.0357349211 -0.1161020632 -0.2769318563 -0.0490248049 0.0688801616 0.0638126044 -0.0316976164 0.1157357639 0.0843593024 -0.0442409352 0.0711246437 0.0696292617 0.0311059908 0.0056058759 -0.0171049614 -0.0005026734 0.0067641402 -0.0104175665 -0.0078152095 0.0005569159 -0.0006792990 -0.0181198498 0.0002552468 -0.0086793594 -0.0163966227 0.0017505462 -0.0246258897 -0.0035595776 0.0029427967 -0.0231616528 0.0004083738 0.0110637348 -0.0100487639 -0.0061367131 0.0014530860 0.0057471492 -0.0252023084 -0.0005179627 -0.0019604706 -0.0234384575 0.0045866603 -0.0354047501 0.0022131876 0.0024480676 -0.0276809259 0.0054389267 0.0090851177 0.0161023891 -0.0190229328 0.0004155821 0.0035350945 -0.0166631677 -0.0169424622 -0.0252679905 -0.0031894407 -0.0314696785 -0.0480480661 0.0096808760 -0.0269940515 -0.0404280169 0.0102878489 0.0257213229 0.0435012736 -0.0298435464 0.0098815427 0.0192027371 -0.0256386459 -0.0125904636 -0.0213233717 -0.0061298653 -0.0442769393 -0.0705484179 0.0188943188 -0.0402132555 -0.0604065572 0.0226467226 0.0791908789 -0.2967710315 0.0097878972 -0.0803600888 0.3017723895 -0.0608979177 0.0350714464 0.0525786086 -0.0252714481 -0.0558448182 -0.0902741885 0.0108372368 0.0134911849 0.0007654391 0.0109821089 -0.0057872495 0.0046047167 -0.0054996306 0.0269479597 0.0085615043 0.0187055281 0.0150125259 0.0211697800 0.0045488233 0.0463196042 0.0042987967 0.0338867911 0.0242322444 0.0266494263 0.0096092194 -0.0193984413 0.0179450465 -0.0211178183 -0.0097732977 0.0257948345 -0.0186760548 -0.0388434317 0.0215914683 -0.0347894843 -0.0212327247 0.0346441225 -0.0328999745 -0.0077860150 -0.0101554869 -0.0005303537 -0.0021986595 -0.0108518560 -0.0012942883 -0.0122523824 -0.0167827359 -0.0022646678 -0.0086347347 -0.0233236110 -0.0031497091 -0.0185485259 -0.0160486145 -0.0033511153 -0.0112668362 -0.0272440762 -0.0041833769 0.0019264905 -0.0181796453 -0.0020601346 -0.0018085894 -0.0241425306 -0.0034833469 0.0089157214 -0.0188198947 -0.0015071786 0.0011763942 -0.0287922393 -0.0045807931 -0.0168503349 -0.1127899953 -0.0146730126 0.0132598912 -0.1234053924 0.0453225780 -0.0704938983 -0.1486616278 -0.0232660652 -0.0236272421 -0.1131570678 -0.0222558366 -0.0048540779 -0.0492452177 -0.1295401567 -0.0499074221 -0.0614938210 -0.1329635305 0.0171604341 -0.0268798011 -0.1531922933 -0.0094437572 -0.0450743012 -0.1427634124 0.0148290289 -0.0098791611 0.0199860943 0.0398922782 -0.0083074070 0.0414468186 0.0274622391 -0.0051393504 0.0311551572 -0.0070998409 0.0003868059 0.0060399863 -0.0021480751 -0.0056680814 0.0080231145 -0.0077748752 -0.0062450472 -0.0094286134 -0.0106480059 -0.0020777221 -0.0016168667 0.0092002388 -0.0036965474 -0.0432540324 0.0038443292 -0.0077169932 -0.0268485622 0.0110294927 -0.0029774898 -0.0560378962 -0.0140084571 -0.0052106409 0.0022954110 -0.0095244386 -0.0107104164 0.0029915388 -0.0084190318 0.0003453296 0.0118012376 0.0115155040 0.0036716166 0.0260891117 -0.0269966804 0.0181531159 0.0082477942 -0.0187172097 0.0402246338 -0.0081492649 -0.0085166109 -0.0275614182 0.0426220696 -0.0122516331 -0.0109746794 0.0312635860 -0.0191696998 0.0272326135 -0.0000529728 -0.0132122275 -0.0076470854 0.0133731855 -0.0155550073 0.0064510113 0.0332732844 -0.0192249756 0.0263470706 0.0190110044 -0.0175624388 0.0117649191 -0.0011660623 -0.0117450418 -0.0226386266 0.0101192899 -0.0141378954 0.0045454844 0.0462085282 -0.0186537011 0.0399269353 0.0231549830 -0.0192941616 0.0443304092 -0.0147252391 -0.0224247278 0.0499553189 -0.0271805456 -0.0220769900 0.0496166024 -0.0283620748 -0.0252787373 0.0472147114 -0.0256171584 -0.0482584938 0.0616716159 -0.0304562035 0.0187976314 -0.0227834177 -0.0130634583 -0.0704091079 0.1086314321 -0.0383341258 -0.0842246170 0.1181872465 -0.0405920483 0.0080827622 -0.0166559462 -0.0145240181 0.0602806536 -0.0761174075 -0.0035611303 -0.0933733051 0.1436417094 -0.0448207118 -0.1205970305 0.1683393978 -0.0490968304 0.0427627620 -0.0678703390 -0.0051979586 -0.0591938892 0.0733852401 -0.0332097303 -0.0207798804 0.0156327333 -0.0095309257 -0.0207329477 0.0172173459 -0.0110199759 -0.0049392504 -0.0163571248 -0.0102595799 -0.0158711100 0.0402494841 -0.0483112806 -0.0170061145 0.0013890404 -0.0292285755 -0.0410100841 -0.0040984162 -0.0138009404 0.0836335489 -0.0406907195 0.0047862487 0.1676416747 -0.0225849416 0.0075903859 0.0614860619 -0.1022349371 0.0633152075 0.0982546443 0.0329648774 -0.0283122964 0.0070968296 -0.0475249329 -0.0214236254 0.0280363231 -0.1389418573 0.0314982677 0.2455738206 0.0650186924 0.0580091308 0.0614326168 -0.0187295065 0.0352303013 0.2236478758 -0.0951829558 -0.0731735322 0.0845850834 -0.0879019907 0.0825573169 0.0137983060 -0.1220504535 0.0549442673 0.0631288675 -0.1012661822 0.1087711878 0.1289098896 0.0322843999 -0.0591710617 0.1030473491 0.0490916563 -0.0403523198 0.0694446492 0.0633672822 -0.0112462185 0.0084474696 -0.1329623502 0.1181232484 0.0555177454 -0.2004207941 0.0091148436 0.0395717226 -0.1543141052 0.0071033527 0.0120436965 -0.0075467186 0.0139982620 0.0130977482 -0.0040954927 0.0101827754 0.0083347113 0.0035953629 0.0025961908 0.0045760117 0.0065788664 -0.0001235345 -0.0010096419 0.0127637505 -0.0008549081 0.0031804325 0.0050990966 0.0060417875 0.0194115200 -0.0100122653 0.0146901959 0.0098857694 0.0026267648 0.0018031500 0.0128407543 -0.0159853476 0.0079029685 -0.0044987581 0.0161518265 -0.0035581188 0.0007007124 0.0068654651 0.0062719624 -0.0449374316 -0.0874154266 0.0344201371 -0.0453184565 -0.0859421515 0.0460395717 -0.0172857893 -0.0336171653 0.0238411242 0.0111940969 0.0199619543 -0.0095049364 0.0248346286 0.0342637543 -0.0301782293 -0.0694690636 -0.1413875062 0.0515053059 -0.0690178544 -0.1247695530 0.0677467171 -0.0110488983 -0.0197070007 0.0285787418 0.0278386750 0.0594762879 -0.0222834384 0.0595364486 0.0867885173 -0.0623175415 0.0279568955 -0.0478526385 0.0135261954 0.0057626095 -0.0063415339 0.0107016426 -0.1556709182 -0.2426570753 0.0867605353 0.1387144214 0.2161654922 -0.0284402718 0.0195090933 0.0058590678 0.0192595895 -0.0014632907 0.0099305872 0.0043259883 0.0283984298 0.0187724168 0.0122487317 0.0076932111 0.0373037107 -0.0146784475 0.0501831602 0.0138678300 0.0236620544 0.0112203801 0.0465012732 -0.0237297274 -0.0207045831 0.0293977754 -0.0170349687 -0.0175431177 0.0422107577 -0.0312611499 -0.0415789266 0.0336020509 -0.0249565208 -0.0348776594 0.0548892542 -0.0532480694 -0.0106926916 -0.0012717041 -0.0040751114 0.0031281020 -0.0025496283 -0.0291331370 -0.0284836028 -0.0011728050 0.0228109377 -0.0337878835 -0.0015091837 0.0325288000 -0.0399700513 0.0001758253 0.0366534529 -0.0493796423 0.0002895407 0.0586329287 0.0026776369 -0.0036778287 -0.0278305651 -0.0173456321 -0.0035106889 0.0055274876 0.0159272999 -0.0047956555 -0.0489109612 -0.0198418599 -0.0042415960 0.0109168458 -0.0063134850 0.0403601844 -0.0539710596 -0.0033485065 0.0324301813 -0.0619449071 -0.0072367718 0.0429307680 -0.0508681408 0.0015319091 0.0491402720 -0.0544945160 -0.0232040661 0.0492337646 -0.0541755926 -0.0266053873 0.0267771287 -0.0743636396 -0.0312363749 0.0762322625 -0.0651804216 -0.0126739673 0.0447580478 -0.0290882754 -0.0097016216 -0.0275161180 0.0076198568 0.0254568247 -0.0196692434 0.0242690119 0.0099844193 -0.0159009402 0.0192717185 -0.0364062531 -0.0085516614 0.0134674045 -0.0373514029 -0.0194902615 -0.0000810476 -0.0069493254 -0.0084088681 -0.0100410060 -0.0303020741 -0.0117937043 0.0186970530 -0.0175638876 -0.0143762688 0.0016287820 -0.0188655931 -0.0099914559 -0.0019808853 -0.0122411351 -0.0148908040 0.0022543563 0.0161160324 -0.0190418994 -0.0419044522 -0.0580269433 -0.0224200926 -0.0262988044 0.0032272997 0.0069179982 -0.0565676803 0.0018901369 0.0242286748 -0.0851646097 0.0158026565 0.0146264594 -0.0731948999 0.0888636716 0.1309176133 -0.0332797300 -0.0157214008 0.0114840907 0.0580953828 0.0075510264 0.0336940409 0.0427790530 0.0728607865 0.0924451578 0.0095445968 0.0628408724 -0.0125174186 0.0286480527 -0.0197109610 0.1090194671 0.0410259188 0.0201267929 0.1317985454 0.0213829487 0.0925505627 0.0234393456 0.0032303135 0.0853570830 -0.0686475872 0.0310016800 -0.0670409948 0.1455394333 0.0582260802 0.0052216107 0.1719143890 0.0214107756 0.0866584117 0.1003390075 0.0042896773 0.0894068428 0.0612201520 0.0338055630 0.1059545204 0.0220545480 0.0620889001 0.0734103474 0.0553181131 0.0389656501 -0.0210623262 -0.0167877535 0.0665086019 0.0166736924 0.0782568335 -0.0119166792 0.0817788224 0.0069142841 0.1068147556 0.0372741791 -0.0380517682 0.1215903555 -0.0369772647 0.0458001029 -0.0036607381 0.0057971917 0.1185156171 -0.0618795702 0.1175361076 0.0137126518 0.1531739785 0.0456828072 -0.0802884637 0.1792330057 -0.0879850869 0.0630587521 -0.0517132122 -0.0554450134 -0.0473133539 0.0747617792 0.1450006110 -0.0224091062 -0.0420771752 0.1177613643 0.0222321024 -0.0500485346 -0.0302532444 -0.0209106668 0.0031770096 -0.0133772485 -0.0265436127 -0.0060098366 -0.0107390090 -0.0161852377 -0.0109006197 -0.0209599550 0.0076614999 -0.0329982444 0.0002327351 -0.0021674314 -0.0114980126 0.0213432644 0.0382410705 0.0038520459 -0.0041527121 -0.0502965989 0.0015921997 0.0044168120 -0.0105070691 -0.0021170193 -0.0016754883 -0.0308011441 0.0065339376 -0.0247317361 0.0109716805 -0.0282070382 0.0229676433 0.0455552372 0.0020858190 0.0311740570 0.0362015649 0.0309663995 0.0221469522 0.0599958720 -0.0103269676 0.0068794964 0.0211717588 -0.0623004782 -0.0017636266 -0.1746297752 -0.0389124484 -0.0214867954 -0.0450220128 0.1259342227 0.0046326224 -0.0132237223 0.0095547300 0.0039272843 -0.0057604546 -0.0011973894 0.0046939872 -0.0214716546 -0.0085562318 -0.0450824932 -0.0033067198 -0.0914355050 -0.0361317540 0.0758023667 -0.0147713558 -0.0111090828 -0.0079857696 -0.0040400809 -0.0032342326 -0.0498152016 0.0093921020 -0.0363622048 0.0215395147 -0.0302801788 -0.0347222919 0.0184838538 -0.0249595382 -0.0033836413 -0.0495367299 0.0139206458 0.0373748050 -0.1329432933 0.0579112685 0.0390816125 -0.1365859202 0.0574668140 -0.0645812646 0.0842034722 -0.0621669994 -0.0582774709 0.0718355756 -0.0519566339 -0.0194399215 -0.0137070658 0.0017494616 0.0640668303 -0.1891605304 0.0900616816 0.0724878716 -0.1983150107 0.0914231184 -0.0349741189 -0.0265509495 0.0061879367 -0.0353040437 -0.0262237659 0.0073537358 -0.0346357004 -0.0211389582 0.0063301244 -0.0425792343 -0.0310938437 0.0112603720 -0.0411684879 -0.0302640464 0.0093697540 -0.0333959360 -0.0251782129 0.0052983788 -0.0317619273 -0.0223753999 0.0057714911 -0.0106912156 0.0163698158 -0.0092232876 -0.0429277678 -0.0315590155 0.0114904905 -0.0443139335 -0.0311408961 0.0087705233 -0.0575196181 0.0865744312 -0.0126008177 0.0055566195 -0.0818604883 0.0046852777 -0.0036505511 0.0175084705 -0.0121559602 0.0052028091 0.0500664898 -0.0207744292 0.0040338065 0.0028023901 0.0181757493 -0.0251182637 0.0081281821 0.0122661635 0.0267383344 0.0243325643 0.0187860580 0.0098319230 0.0538864144 0.0068281496 0.0572347930 0.0173217127 0.0248996593 0.0251752499 0.0694419248 0.0053562000 -0.0444819728 0.0399926832 -0.0010674683 -0.0276940822 0.0615013136 -0.0076530302 -0.0761493369 0.0463349505 -0.0086964458 -0.0441582975 0.0826941660 -0.0222427385 -0.0331643503 -0.0189420476 0.0228950899 -0.0174188223 -0.0201143337 -0.0028183893 -0.0413695600 -0.0261475861 0.0251096855 -0.0166111586 -0.0347913629 -0.0136453083 -0.0627052895 -0.0234025963 0.0462105185 -0.0165796672 -0.0371062797 -0.0167501990 0.0084216008 -0.0306012142 -0.0419623092 0.0105558934 -0.0380882560 -0.0546009173 0.0311215023 -0.0325775816 -0.0663320914 0.0337346840 -0.0444232841 -0.0918555341 -0.0243879727 -0.0929497186 0.0392900730 0.0560814752 -0.1747844393 0.0970677828 -0.1476129676 -0.1321079095 0.0627601336 0.0017311271 -0.0266511475 -0.0051537814 -0.0424838336 0.0020162578 -0.0574153041 -0.0912588326 0.0127584930 -0.0368068763 -0.0117791811 -0.0071608529 -0.0677642350 -0.0452602358 0.0202504048 -0.0966050474 -0.0023016445 -0.0120873111 -0.0117693177 0.0267935857 -0.0025074888 -0.0186340843 0.0114480021 0.0008690313 -0.0163074612 -0.0085245069 -0.0024195640 0.0018294898 -0.0057602549 -0.0095235167 -0.0041816614 -0.0072331022 -0.0059732115 0.0015403059 -0.0145987439 -0.0054241356 0.0120772664 -0.0007729378 -0.0108908449 0.0009724113 -0.0067211966 -0.0073158043 0.0071501109 0.0048419482 -0.0110405471 -0.0036978946 0.0017582751 -0.0089132414 -0.0145388905 -0.0010391355 0.0001946464 -0.0082770378 0.0004103200 -0.0273461075 -0.0286230286 -0.0406695594 -0.0306020635 -0.0617998426 0.0402150536 -0.0635649905 -0.0199178082 0.0431800460 -0.0108027637 -0.0036189387 -0.0373206668 0.0686241054 -0.0766322865 -0.0066610341 0.0408182226 -0.0575862971 0.0553373192 -0.0110183975 -0.0122851289 0.0407033828 -0.0031652558 -0.0249750697 -0.0124567316 0.0460664841 -0.0606878074 0.0244021743 0.0141806042 -0.0388482860 0.0748485878 -0.0290353921 -0.0053501486 0.0529968249 -0.0097435019 -0.0164635095 -0.0465406052 0.0742127070 -0.0801062071 0.0166283753 0.0145081555 -0.0446351356 0.0441089010 -0.0147619503 -0.0043539143 0.0434299867 -0.0342228795 0.0065015772 0.0507694837 -0.0463357271 0.0100046698 0.0321654538 -0.0181636986 0.0020868271 0.0055453499 -0.0174710518 0.0030046505 0.0645733177 -0.0777205590 0.0084284933 -0.0209636611 0.0504425234 -0.0068383019 -0.0379082892 0.0544032812 -0.0069338575 0.0568459372 -0.0848524029 0.0102913668 0.1060634512 -0.1289974237 0.0147756506 -0.0438636808 0.0940461073 -0.0076450051 -0.0786194472 0.1079779397 -0.0116750477 0.0916455032 -0.1419199567 0.0161688991 -0.0009001276 -0.0202215939 0.0038042881 0.1277160840 -0.0769385165 0.0046473432 0.0974812141 -0.0607923662 0.0088050729 -0.0106036764 -0.0111640642 0.0111665798 -0.0246007619 -0.0169776106 0.0581980031 -0.0466506428 0.0124726766 0.0302298776 -0.0751238422 0.0306429508 0.0257824648 -0.0147219078 0.0167191274 0.0219232691 0.0057174664 0.0155912673 0.0195634930 -0.0119956322 -0.0267925226 0.0220630652 0.0308347909 0.1006554096 0.0200137775 -0.0664368600 0.0415205239 -0.0076047792 -0.1018775412 0.0803184098 -0.0497555293 -0.0054174613 -0.0087601016 0.0183568842 0.0355644113 0.0139572622 0.0183328965 -0.0026142090 0.0431230960 0.0218272950 -0.0192651791 -0.0352632852 0.0210102408 -0.0227166743 -0.0287607146 0.0209702140 0.0055628418 -0.0315779617 0.0282159557 0.0973529984 0.0922992004 -0.0144119733 0.0243313869 0.1500371083 0.0344430094 0.0111152956 0.1309475631 0.0371179590 0.0434681447 0.1281902031 -0.0070076333 -0.1905961510 -0.0467748256 -0.0118578134 -0.1829469915 0.1925193626 -0.1614514972 -0.0007610096 -0.0155273210 -0.0047426906 0.0394159702 -0.1328755953 0.0721715987 0.0292811102 -0.1058318239 0.0719302289 -0.0115208805 0.0190202338 0.0090082118 -0.0528701195 0.1328339261 -0.0628535502 -0.0523273804 0.1182507004 -0.0719310308 0.0718822899 -0.2402523685 0.1198389667 0.0497377343 -0.1733458031 0.1134304028 -0.0082598078 0.0305633048 0.0230772020 -0.0849220332 0.2339551289 -0.1131603948 -0.0929202255 0.2103788175 -0.1299856977 -0.0146132981 -0.0137924804 0.0114055378 -0.0145201371 -0.0141334901 0.0083396337 -0.0105069727 -0.0132218739 0.0060897744 -0.0120430232 -0.0184195163 0.0101266435 -0.0123459903 -0.0172017926 0.0126875261 -0.0148366864 -0.0114251784 0.0113826201 -0.0146247092 -0.0109366660 0.0053715379 0.0019043013 0.0036895954 -0.0069913854 -0.0101642859 -0.0193414282 0.0092497233 -0.0112548790 -0.0181849604 0.0143525223 0.0236779083 -0.0248298068 0.0341158133 -0.0374043675 0.0980937028 0.0240442450 0.0094731762 0.0019814598 -0.0098313028 0.0058679754 0.0211186933 -0.0151655026 0.0109445948 0.0133268125 -0.0126347848 0.0002292957 0.0146615831 -0.0032530280 0.0288797150 0.0301703650 -0.0131518926 0.0295060081 0.0499187762 0.0005153340 0.0446067938 0.0262675630 -0.0239211087 0.0422352062 0.0606192832 0.0026720427 -0.0022200251 0.0376965301 0.0075290427 0.0146385256 0.0534347874 0.0093542809 -0.0181646227 0.0412574576 0.0151701276 0.0143750324 0.0670980376 0.0182707134 -0.0169522167 -0.0124450290 0.0169474896 -0.0005545731 -0.0144779330 -0.0026044553 -0.0299190150 -0.0205834985 0.0267101128 -0.0127943412 -0.0304002393 0.0032437121 -0.0514095498 -0.0178206512 0.0465978171 -0.0196000554 -0.0339565965 0.0090113426 0.0198402337 -0.0253820267 -0.0303285077 0.0148865678 -0.0335772575 -0.0324859898 0.0415294011 -0.0272671245 -0.0511441307 0.0320167333 -0.0408791700 -0.0574733045 -0.0239485425 -0.0362852172 0.0673478329 0.0133898460 -0.0797684464 0.0840147106 -0.0796767320 -0.0511846243 0.0806368450 -0.0068231949 -0.0005188073 0.0461848129 -0.0314110838 -0.0085429542 0.0445835638 -0.0371117810 -0.0309073242 0.0241248619 -0.0412084108 0.0219687271 0.0325665061 -0.0157095138 -0.0075935082 0.0680405554 -0.0021205590 0.0178098474 -0.0095547221 -0.0494045353 0.0202422400 -0.0666043117 -0.0283174255 0.0147986473 -0.0442469567 0.0038715031 0.0067867150 -0.0236233457 0.0210717777 0.0083838645 0.0101882201 -0.0272892112 0.0148538830 0.0072779409 -0.0128190545 0.0094261158 -0.0212009296 0.0012952864 0.0033566258 0.0053186903 -0.0089977037 0.0167912096 0.0096587410 0.0121212282 0.0024463192 0.0052541391 -0.0398645699 0.0232570240 0.0229017338 0.0405011206 0.0190087132 0.0345731213 -0.0105050622 -0.0902091671 0.0005787644 -0.1526734328 -0.1357250463 -0.0611061502 0.1176402050 -0.2003597664 0.0119865986 -0.0048758761 0.0126241660 0.0266491111 0.0958786106 -0.0182825834 0.0512824938 0.0601157027 0.0060468186 0.0346139156 -0.0106440858 0.0507299882 0.0088781864 0.0632086352 0.0010490887 0.0479524218 0.0059712477 0.0463199406 0.0011507778 -0.0268231376 0.0651246752 -0.0120925480 0.0193018511 0.0308689470 0.0271012067 0.1004562990 -0.0219020091 0.0730197083 -0.0058381585 0.0563416187 -0.0099098828 -0.0603889419 0.0796882310 -0.0331383811 -0.0135007308 0.0368404468 0.0190617869 -0.0135882138 0.0270046927 0.0276543275 -0.0097684372 0.0140662146 0.0399162816 -0.0067374542 0.0234429737 0.0329281015 0.0128498531 0.0338147579 0.0342353119 0.0561361954 -0.0546388126 0.0641862678 -0.0589305928 0.1017832441 0.0059690773 -0.0526431214 0.1133393478 0.0030938384 0.0713374399 -0.0561448213 0.0656014351 0.0989015990 -0.1199088940 0.0909002875 -0.0985070210 0.1605466329 -0.0056109278 -0.0939119350 0.1791363991 -0.0229666882 0.1290210163 -0.1273615201 0.0891893339 0.0209658848 0.0384716758 0.0330287040 0.0095276451 0.0387589355 0.0194120559 0.0625645230 -0.0184693824 0.0259979379 0.0124429826 0.0469340700 -0.0010342102 -0.0052757931 -0.0144957406 -0.0090714071 0.0042579354 -0.0036159085 -0.0091667838 0.0467284369 -0.0571255047 0.0295453886 0.0124996087 -0.0502016372 0.0140285944 0.0101697150 -0.1157268208 -0.0139234190 0.0144159702 0.0362267507 0.0001447104 -0.0109593605 -0.0653815434 -0.0023316565 -0.0346295123 0.0644643455 -0.0585001672 -0.0123314649 0.0442546769 -0.0334402708 0.0552117242 -0.0890161451 0.0255067176 -0.0650055457 -0.1091126256 -0.0582307564 0.0434129100 -0.2017170809 -0.0371657730 0.0026025670 -0.0459157395 0.0752486127 0.0212940887 0.1985871023 0.0530885979 0.0184261514 0.0351502575 -0.1657130875 0.0073415747 -0.0836482008 0.0592075819 0.0037710680 -0.0176201358 -0.0371171217 -0.0568804625 -0.1126433212 -0.0310468179 0.1047265445 0.0914499825 0.0674334867 -0.0432909913 -0.1111696701 -0.0320185191 -0.0827975201 0.1416252822 -0.1190235989 -0.0043271969 0.0321045665 -0.0103682663 -0.0348871985 0.1076774663 -0.0550497270 -0.0303918710 0.1022007664 -0.0531635744 -0.0029423027 0.0371958181 -0.0174177589 0.0205527975 -0.0191631566 0.0156035546 0.0252300760 -0.0267206556 0.0217792379 -0.0583798084 0.1691321695 -0.0841772823 -0.0472024704 0.1422345404 -0.0735902977 0.0052295687 0.0117605582 -0.0124344086 0.0392903703 -0.0658883046 0.0407875328 0.0516076042 -0.0797181347 0.0521080035 0.0138487421 0.0586132162 -0.0095599966 0.0171807410 0.0638920433 -0.0177684431 0.0206637872 0.0625201236 -0.0198558878 0.0418435271 0.0813733010 -0.0259671494 0.0356355042 0.0742016500 -0.0165011078 0.0055549595 0.0577440832 -0.0050200604 0.0101164306 0.0569458860 -0.0151078312 -0.0219275206 -0.0001893435 0.0005157685 0.0511442801 0.0861181687 -0.0316054136 0.0426213128 0.0797911827 -0.0186411738 -0.0118672179 0.0730689136 -0.0192843111 0.0258007950 -0.0730588177 -0.0009476282 -0.0451475561 -0.0290068854 0.0101538167 -0.0381023796 -0.0334453098 0.0112288552 -0.0211335588 0.0038436759 -0.0355406649 -0.0014275483 0.0001308733 -0.0260315931 -0.0233292742 -0.0114581384 -0.0145403117 0.0091154702 -0.0334659906 0.0319199323 -0.0448448653 -0.0065358980 -0.0232391855 0.0151535587 -0.0455598940 0.0594788101 0.0244920672 -0.0218171642 0.0057983853 0.0342434390 -0.0385469089 0.0441864388 0.0457151306 -0.0262271417 0.0109111477 0.0617279673 -0.0544653017 0.0819382886 -0.0110174327 -0.0025945599 -0.0186322440 -0.0023666787 -0.0053161850 -0.0014845929 -0.0221442443 -0.0198018694 -0.0220189718 -0.0194404364 -0.0373274313 -0.0122372205 -0.0350389197 -0.0180612200 -0.0273064449 -0.0285151174 -0.0490590101 -0.0134790514 0.0019471012 -0.0227910828 0.0076702945 -0.0069751681 -0.0385204457 0.0013479141 0.0123361044 -0.0238251315 0.0215060958 -0.0046019480 -0.0512746534 0.0091627037 -0.0232973466 -0.0130242219 0.0006234390 0.0168461628 -0.0593777926 0.0189910485 -0.0886767699 -0.0107604700 0.0364922427 -0.0161098704 0.0322083859 -0.0443609424 0.0021370500 -0.0337021992 -0.0222049275 0.0057475401 -0.0586421012 -0.0463659258 -0.0002893647 -0.0058265626 -0.0365476705 0.0032397016 -0.0444215012 -0.0012599953 -0.0053463391 0.0154092007 -0.0038515095 -0.0261339952 0.0182636874 -0.0389454856 -0.0197568715 0.0163937578 -0.0286931812 0.0028797087 0.0114517247 -0.0239640629 0.0206184635 0.0083628232 0.0092647027 -0.0200222952 0.0242599538 0.0085578520 -0.0091433009 0.0157203278 -0.0208654488 0.0113091486 0.0153611458 -0.0105052297 -0.0015374075 0.0261504641 0.0033422411 0.0238161859 0.0145914411 -0.0148166232 -0.0378154065 0.0365550951 0.0332951394 0.0487468763 0.0205395487 0.0388061278 0.0001977928 -0.0603400793 0.0257922304 -0.1013248302 -0.1131490520 0.0109083455 0.0926188933 -0.1354700621 0.0278237130 0.0058836174 0.0103081483 0.0155706450 -0.0243931987 0.0276437879 0.0074650812 -0.0109737395 0.0233258913 0.0104240632 0.0144912844 0.0183998111 0.0111863089 0.0068487743 0.0087091788 0.0119656426 -0.0087155994 0.0292312846 0.0137463684 0.0061801850 0.0252010299 0.0157742605 0.0212196049 0.0055158828 0.0132801867 0.0087777409 0.0002015733 0.0110378845 -0.0185460402 0.0369591740 0.0142484926 0.0085339907 0.0305225538 0.0189763514 0.0026605685 0.0292081770 0.0016272236 -0.0072349592 0.0269373724 -0.0144438551 -0.0029607496 0.0247046795 -0.0220787104 -0.0159204728 0.0280993877 -0.0167887987 0.0412273635 -0.0076085563 -0.0077858064 -0.0733080023 0.1246042106 -0.0311105809 0.0591515278 -0.0759098285 -0.0002929771 0.0991833407 -0.1053119133 0.0063482946 -0.0527642402 0.1191085542 -0.0300054238 -0.1415859286 0.2117929714 -0.0453644249 0.0936710844 -0.1287268239 0.0100435187 0.1688320434 -0.1975468177 0.0165068034 -0.1095965762 0.2081372132 -0.0419732848 0.0632221942 -0.0274996532 -0.0032157603 0.0360884938 -0.0066650758 0.0163244775 0.0604019090 -0.0417588865 0.0219954124 0.0083700929 0.0422913299 -0.0005106452 -0.0191209684 0.0077553579 -0.0383270744 -0.0094856867 0.0041718699 -0.0279109669 -0.0270348000 0.0501454574 -0.0727063708 0.0066935615 0.0363302574 -0.0157751029 0.0291326924 0.1172404777 0.0187397811 -0.0081367627 -0.0859653040 0.0309993659 0.0067299881 0.0174651488 -0.0041127745 0.0319909613 -0.0612938667 0.0477062153 0.0448824091 -0.0493616137 0.0527718431 0.0019629411 0.1100075673 -0.0094276704 0.0768527629 0.1109289375 0.0682520267 0.0096021099 0.1809827845 0.0245496877 -0.0067288565 -0.0219126120 -0.0388444086 -0.0452591670 -0.2656012358 -0.0283967296 0.0149704136 -0.0927476908 0.2181816318 -0.0175544270 0.0263516175 -0.0172304498 0.0029367654 -0.0136175447 0.0048192023 0.0289738193 0.0264262051 0.0016153516 -0.1391216553 -0.1189172493 -0.0703769821 0.1325372188 0.1702849178 0.0256076812 0.1511752516 -0.1966563484 0.2095848556 -0.0072711512 0.0193050486 -0.0016173712 0.0190271531 -0.0354467066 0.0267561833 0.0193401592 -0.0416285310 0.0216956544 -0.0057537553 -0.0012257240 -0.0037168185 -0.0356946273 0.0570079865 -0.0336556157 -0.0399625964 0.0714983063 -0.0339517780 0.0378113561 -0.0729943495 0.0467338835 0.0384429845 -0.0779796207 0.0369897090 0.0057004732 -0.0348206313 0.0094724904 -0.0544773252 0.0892854027 -0.0539477572 -0.0682523357 0.1166549880 -0.0550358541 0.0077398961 0.0531119953 -0.0098491606 0.0008463069 0.0437004606 -0.0137611559 -0.0015438488 0.0285484166 -0.0103915938 0.0122883537 0.0365336297 -0.0102888454 0.0159895656 0.0444028174 -0.0051742264 0.0078169815 0.0647158482 -0.0107065351 -0.0066714877 0.0414211595 -0.0158252565 -0.0283122427 -0.0135890147 -0.0017866434 0.0141268436 0.0282960099 -0.0103832665 0.0213238635 0.0447092041 -0.0029200771 0.0343673002 -0.0956386674 0.0200160342 -0.0074633822 -0.0102368228 0.0125459478 -0.0485468963 -0.0493036447 0.0064968599 -0.0311354660 -0.0178975910 -0.0013346158 -0.0166495943 0.0098110919 -0.0268361161 -0.0034260189 0.0075459191 -0.0292769212 -0.0155503730 -0.0034059342 -0.0043033717 0.0079208475 -0.0214432706 0.0276728577 -0.0282386171 -0.0003831923 -0.0026738717 0.0146741687 -0.0324906868 0.0546792059 0.0137681288 -0.0099999550 -0.0096227309 0.0230840729 -0.0248307532 0.0253865586 0.0270813886 -0.0128844939 -0.0113564408 0.0428704014 -0.0386530062 0.0509483181 -0.0057289124 0.0072660723 -0.0223923610 0.0052167510 0.0054936314 -0.0132086698 -0.0209105473 -0.0066669110 -0.0164099096 -0.0253035811 -0.0212147170 0.0042048208 -0.0333793735 -0.0051827901 -0.0209771889 -0.0399814723 -0.0308418558 0.0142257634 0.0053035817 -0.0097808475 0.0015871231 -0.0119408888 -0.0227099426 0.0128158050 0.0168450165 -0.0108794225 0.0093491008 -0.0150549863 -0.0334742364 0.0289811831 -0.0209859707 -0.0161356225 -0.0232627802 -0.0445252543 0.0228858886 -0.0112856886 0.0136981115 -0.0312209867 -0.0562797796 -0.0337838144 -0.0577748782 0.0104027173 -0.0241146095 0.0140049693 -0.0448455026 -0.0274747459 0.0342012034 -0.0252487646 -0.0153589442 -0.0095970869 -0.0351651142 -0.0282951829 0.0170219927 -0.0627683828 -0.0107015920 -0.0685738001 -0.0131099000 0.0212616465 -0.0566042266 -0.0219641307 0.0047217660 -0.0530656635 -0.0125652081 -0.0062325325 -0.0321013109 0.0284265646 -0.0152290438 -0.0594203667 -0.0010637958 -0.0065192654 -0.0161725612 0.0238959519 -0.0055340015 -0.0158469889 0.0390986336 -0.0609929884 0.0038067323 0.0555998274 -0.0176328522 -0.0107145057 -0.0074953477 -0.0797880896 0.0047790157 0.0619204509 -0.0001369094 -0.0200671579 0.0209855127 -0.0303352865 -0.0772972230 -0.0022278417 0.0003389623 -0.0181776963 0.0192065654 0.0404779006 -0.0247429971 0.0653021750 -0.0212952818 0.0364506224 -0.0248964836 0.0419544670 0.0666864551 -0.0365418904 -0.0768216759 -0.0041524099 0.0173886789 -0.0412651637 0.0021681566 0.0130475224 0.0381872397 0.0295373885 -0.0084915689 -0.0217083020 -0.0097875687 -0.0211461832 -0.0108166499 0.0191653763 0.0422198845 0.0301705944 0.0331994961 0.0303856786 0.0234613803 0.0005562104 -0.0294838265 -0.0403327990 -0.0298855458 -0.0432662398 -0.0201298842 0.0246889049 0.0723906470 0.0520970953 0.0503653301 0.0515712404 0.0427399238 0.0529633087 -0.0275038436 0.0372680995 0.0419070991 -0.0289645691 0.0483982259 0.0212386102 -0.0224541569 0.0296982004 0.0294419562 -0.0258311316 -0.0063172696 -0.0124874319 -0.0160510915 0.0227194652 0.0106685316 -0.0454810672 0.0178996029 0.0291189572 -0.0031533255 0.0000573522 0.0084382413 0.0027497302 0.0045819413 -0.0110758408 -0.0403755586 0.0322875509 0.0106084374 -0.0649281819 0.0216074008 0.0440320051 0.0116744388 -0.0084700288 0.0081040633 0.0223095325 0.0002938173 -0.0282042706 -0.0554093973 -0.0197357318 -0.0301103976 -0.0113773078 0.0519965689 -0.0218183445 -0.0529114201 0.0303955897 0.0045218371 -0.0580508844 0.0334261702 0.0336814369 -0.0700993684 -0.0115999667 0.0144753460 -0.0025537272 -0.0084811157 0.0101776534 0.0061069860 -0.0028927598 -0.0094197537 0.0232387359 -0.0038997173 -0.0074895678 0.0168009151 -0.0022001413 -0.0460162732 0.0011846111 -0.0058326944 0.0006839400 0.0244568666 -0.0209935274 0.0194015773 -0.0180373454 -0.0152482891 0.0213389804 -0.0101617691 -0.0118338492 0.0014934220 0.0011441343 0.0335131707 -0.0069948678 0.0248584146 -0.0712613815 -0.0415047818 -0.0196041485 0.0242882553 -0.1170892210 -0.0162336161 -0.0226099061 -0.0668250410 0.0748864011 -0.0213900145 0.0905515585 0.0533895441 0.0316309300 -0.0100644224 -0.0645951830 -0.0116271747 0.0195681773 -0.0286266950 -0.0095418586 0.0282151121 -0.0450801884 -0.0539156755 0.0352946989 -0.0096861288 0.0210823551 0.0164092129 0.0419135415 -0.0219027593 -0.0536779209 0.0009437016 -0.0308335902 0.0279760892 -0.0332460700 -0.0052588016 -0.1000614275 0.0006898802 -0.0047316906 -0.1460147303 0.0401776137 -0.0123706747 -0.1270303097 0.0488591392 -0.0207411669 -0.0772594975 0.0285109349 -0.0081655361 -0.0663065167 0.0076154775 -0.0064500862 -0.0810445427 -0.0049435586 -0.0077435533 -0.1867791275 0.0514676114 -0.0149600125 -0.1381549407 0.0601802486 -0.0451576953 -0.0009945709 0.0230516961 -0.0047291529 -0.0318648167 -0.0025893109 -0.0099877101 -0.0614054485 -0.0214640640 0.0688145575 0.0653339536 -0.0799160633 0.0896900641 0.0941821553 -0.0744543584 0.0750335636 0.1023948154 -0.0674894037 0.0878437555 0.1390265378 -0.0950800067 0.0689345236 0.1013662074 -0.0963593097 0.0604280213 0.0403341783 -0.0737201499 0.0924672064 0.0789460117 -0.0592541616 -0.0114873205 -0.0105785688 0.0328925503 0.0875608229 0.1615485776 -0.0977922233 0.0610039716 0.1068896505 -0.1069341484 -0.0502029655 0.0218126130 0.0207426037 -0.0604999871 0.0486748985 0.0191104322 -0.1108345535 -0.0502451513 0.0725843973 0.0051582413 -0.0837632027 0.0868267704 0.0042605709 -0.0325278928 0.0012113156 -0.0033516543 -0.0284518480 0.0191422779 0.0104375366 -0.0222250162 -0.0063122755 0.0074064835 -0.0121229294 -0.0046373921 0.0153957746 -0.0235864730 -0.0152820568 0.0110399673 -0.0042601559 -0.0113565197 -0.0092240786 -0.0201500913 0.0138607224 -0.0048166408 -0.0098223322 0.0035245627 -0.0173968919 -0.0183744607 0.0150945265 -0.0111902865 0.0019624062 0.0002181170 0.0015801329 0.0159521639 0.0196251125 -0.0625789050 0.0242821704 0.0733238388 0.0995997547 0.0604033083 -0.0750498016 0.0953717708 0.1089986031 -0.1085671736 0.1884540397 0.0499048188 -0.1248203395 0.1753110331 0.1299513851 -0.2036396711 -0.1026691441 0.0805216507 0.0924150885 -0.0165686228 0.1221117853 0.0015499891 -0.1945720236 0.0885760645 0.1545782683 -0.0349219593 0.1570714668 0.0019660508 -0.0280675652 0.0141576019 0.0062403840 -0.0000923321 -0.0159859151 0.0228520368 -0.0725355058 0.0133739202 0.0282351815 -0.0241328064 0.0416105563 -0.0230534350 -0.0261576913 0.0285851088 -0.0303213904 -0.0493587706 0.0197986967 -0.0333159264 -0.0180908435 0.0396262735 -0.0409672851 -0.0231302106 0.0329541337 -0.0337195188 -0.0075394325 -0.0163944868 -0.0141102246 0.0506298187 -0.0142778960 0.0350806740 0.0329012716 -0.0099225266 0.0325784661 -0.0024971779 -0.0099611321 0.0356411664 -0.0078276767 -0.0150096182 0.0129213836 0.0120772374 -0.0333738013 -0.0033366304 0.0034487053 -0.0172475638 0.0320481440 -0.0151681932 -0.0239786722 0.0112458192 0.0027571596 -0.0360466183 -0.0131218494 -0.0290727148 -0.0227631732 0.0107255051 0.0284351207 -0.0524735080 -0.0217539866 -0.0103461431 -0.0077478979 0.0001324566 0.0101696518 -0.0176273441 -0.0244791642 0.0097631677 0.0092995486 -0.0648364133 0.0037489831 -0.0352603446 0.0051836965 -0.0504510567 0.0208846964 0.0169781582 0.1104494264 -0.0155604853 0.0451346232 0.0605411449 0.0102288961 0.0275107401 -0.0422916541 0.0531063620 -0.0006563362 0.0704585438 -0.0014591660 0.0565334371 -0.0194208970 0.0587282636 -0.0246011740 -0.0642305019 0.0734459569 -0.0339115635 0.0044366842 0.0327626259 0.0324129570 0.1252840458 -0.0308063225 0.0947481678 -0.0375878949 0.0746483885 -0.0510057787 -0.1086698940 0.0903780685 -0.0618441393 -0.0521445148 0.0388880784 0.0060684757 -0.0551197062 0.0491216835 -0.0000172782 -0.0580098148 0.0496734708 0.0059836318 -0.0383547875 0.0288471811 0.0088505061 0.0177820744 -0.0089239847 0.0209474455 -0.0577871597 0.0725492282 0.0099078422 0.0081153935 -0.0305288634 0.0161095709 0.0380127001 -0.0511153465 0.0210097720 -0.0327831246 0.0566332615 0.0144242121 -0.0987174356 0.1219978797 0.0056119359 0.0242548361 -0.0599006735 0.0163893427 0.0752815135 -0.1000439327 0.0252013606 -0.0531120876 0.0940069788 0.0134375707 0.0396480935 -0.0261201111 0.0248246276 -0.0080083841 0.0426189736 0.0354874686 0.0068166558 0.0239595215 0.0397746546 0.0034523067 -0.0454311780 -0.0194299113 -0.0054999350 0.0158475760 -0.0154301453 0.0139720377 -0.0109247696 0.0119878103 0.0620905688 -0.0714547220 0.0534626974 0.0012987510 -0.0531055616 -0.0091142984 -0.0348840153 -0.1277326806 -0.0398063508 0.0172140110 0.0569985926 -0.0603045910 -0.0371566100 -0.1055024580 -0.0200637082 0.0023554425 0.0118121957 -0.0019831339 0.0172841249 -0.0133639500 0.0207052156 0.0051005961 -0.0926430387 -0.0098230993 -0.1125135133 -0.1199942811 -0.0834178809 -0.0061132491 -0.2161356604 -0.0515834068 0.0060747074 0.0082290066 -0.0227703215 0.0633402063 0.1829134278 -0.0177610985 -0.0005283292 0.0618720627 -0.2007977853 -0.1016131475 -0.0928044651 -0.0082414699 -0.0321875141 -0.1623378179 -0.0305446545 -0.0150667397 -0.1164208258 -0.0256634153 -0.0462755746 -0.0337834360 0.0067903221 0.0551713336 0.0363882277 0.0036029420 0.0523412099 -0.0616810779 0.0635870163 -0.0310063363 0.0005435129 -0.0537154976 -0.0268692128 -0.0393406355 -0.0210336465 -0.0363843350 -0.0195266747 -0.0146391864 -0.0440394759 0.0319289505 -0.0357176407 -0.0608527051 0.0997835044 -0.0862965641 -0.0622779914 0.0854645445 -0.0960767259 -0.0139423371 -0.0991125994 0.0029360093 -0.0309971101 -0.0552063925 0.0115915795 -0.0120225705 -0.0223620512 0.0424941989 -0.0671124773 0.1480062216 -0.1065156421 -0.0780414445 0.1271324838 -0.1252136566 0.0108278152 -0.0570149515 -0.0063340747 0.0215348590 -0.0421085545 0.0021072418 0.0232536068 -0.0197912314 -0.0013784116 0.0092125847 -0.0182179607 -0.0104320775 0.0015266271 -0.0344706012 -0.0190465955 0.0115893390 -0.0766216797 -0.0051866052 0.0288603493 -0.0452429319 0.0088438418 0.0386433217 0.0093931970 0.0113839121 0.0063714934 -0.0011124610 -0.0108110104 -0.0047079636 -0.0314925394 -0.0251609653 0.0704859027 -0.0540064202 0.0675522845 -0.0598752871 -0.0466006377 0.0916591258 0.0378236562 0.0396455318 0.0113978764 0.0522743691 0.0056948702 0.0215855229 0.0414817542 0.0062431661 0.0518837940 -0.0016827605 0.0138218211 0.0193825246 0.0840498124 0.0370906263 0.0657460110 0.0359118495 0.0846054413 0.0046012295 0.1491418817 0.0225436258 0.1065311729 0.0577135323 0.1047366285 0.0053985812 -0.0597278407 0.0668024980 -0.0482697371 -0.0450311914 0.0996808452 -0.0731372355 -0.1265404997 0.0797399817 -0.0849984139 -0.0961192298 0.1316221614 -0.1416151814 0.0037649668 -0.0108679507 0.0260026847 -0.0127494027 -0.0096729353 0.0258618887 0.0311430304 0.0002655627 -0.0017915379 0.0347960188 0.0151681893 -0.0218753525 0.0541126766 -0.0025953764 -0.0144784689 0.0605057862 0.0235569194 -0.0503925380 -0.0193871033 0.0070379871 0.0222322555 0.0052365244 0.0190025077 -0.0027573079 -0.0398965445 0.0088628861 0.0302594948 0.0044302993 0.0300926971 -0.0119080715 -0.0249314428 0.0734898147 -0.0377532423 -0.0356073814 0.0778473741 -0.0581241200 -0.0131371718 0.1132120288 -0.0034086708 -0.0398309564 0.0813739654 -0.0675130519 0.0113904978 -0.0074175840 0.0009211002 0.0270539455 0.0086155855 0.0143300538 0.0245383443 -0.0351318132 0.0092432725 -0.0067002802 -0.0147501175 -0.0166117186 0.0290090025 -0.0134288649 0.0334585945 0.0129820395 -0.0172719032 0.0313909394 0.0139311280 -0.0174005831 0.0209020034 0.0156233775 -0.0084645063 -0.0144634542 0.0208364815 -0.0108926601 -0.0046781746 -0.0074253122 0.0148553299 0.0105409432 -0.0035087082 0.0007296767 -0.0141002643 0.0195563851 0.0096839549 -0.0312300944 -0.0125927902 0.0179638446 0.0238925602 0.0380225420 0.0090261173 -0.0435240256 -0.0141113614 0.0293054108 0.0174379159 0.0184259428 -0.0157364194 -0.0072919306 0.0068467190 0.0066430171 0.0233550854 0.0249027985 -0.0223394533 0.0841019960 -0.0013234329 0.0483843410 -0.0186920139 0.0294317223 0.0969259572 -0.0527932337 -0.0740195003 -0.0401093439 0.0565958220 -0.0463048117 -0.0145000966 0.0390430573 0.0204671734 0.0540439304 -0.0162366006 -0.0280245262 -0.0224796043 -0.0123853056 -0.0236671995 0.0230831248 0.0671071866 0.0110755531 0.0581550910 0.0400543321 0.0087639505 0.0094675373 -0.0368827190 -0.0419056422 -0.0601592240 -0.0357438776 -0.0313508766 0.0265503258 0.1100069753 0.0343690752 0.0870352391 0.0649965411 0.0296596686 0.0884068941 -0.0465019413 0.0210013100 0.0718300352 -0.0472949795 0.0366215492 0.0425470092 -0.0385404449 0.0224696924 0.0399194207 -0.0396434977 0.0043933800 -0.0168757863 -0.0280831696 -0.0035784630 0.0517131898 -0.0662176244 0.0398779633 -0.0010015510 -0.0095599817 0.0329169527 -0.0297791017 -0.0022928062 -0.0151923707 0.0260710694 -0.0602684473 -0.0186070469 0.0839916946 -0.0930272895 0.0580330876 -0.0079533717 0.0095359688 0.0479204926 -0.0625045857 0.0225071512 -0.0387202002 0.0385665404 -0.0795731902 -0.0039849721 -0.0401521928 -0.0220797965 0.0335674122 -0.0070924385 -0.0659862472 0.0233476927 0.0119804011 -0.0731865504 -0.0296703873 0.0189148448 0.0465798598 -0.0203933501 0.0269684061 0.0006035247 -0.0056599262 -0.0010282530 0.0309844077 0.0311259939 -0.0684708693 0.0850677208 -0.0023097976 -0.0544890830 0.0131300338 -0.0385326805 -0.1606324639 -0.0317149021 0.0150405436 0.0579496596 -0.0407177602 -0.0162175396 -0.0454821420 -0.0092466599 -0.0240230163 0.0309177695 -0.0062872417 -0.0249433925 0.0007899086 0.0072561678 0.0312489935 -0.0951833597 0.0187752635 -0.1754885504 -0.1485774410 -0.0932468461 0.0134022403 -0.3088913678 -0.0598704747 -0.0022471296 -0.0327492054 0.0356831117 0.0531481889 0.2513366366 0.0235672010 0.0135744834 0.0582771373 -0.2458281695 -0.0438917828 -0.0321566351 -0.0396202435 -0.0159972974 -0.0847036961 -0.0088136901 -0.0012636726 -0.0193439873 0.0065972930 -0.0021519975 0.0125220396 0.0468842815 -0.0346858044 -0.0498256153 0.0068418647 -0.0380353346 0.0193813844 -0.0295580541 0.0356369694 -0.0111965419 0.0466939357 0.0663003904 -0.0563207063 0.0641912439 0.0595482879 -0.0474482073 0.0425875097 0.0302484359 -0.0050634147 0.0137785255 0.0009885734 0.0333392870 0.0027869921 0.0048651794 0.0350530177 0.0171517035 0.0931953841 -0.0912200275 0.0868829674 0.0749854940 -0.0684030877 0.0471801725 0.0276686747 -0.0113167785 -0.0097775755 -0.0255510157 0.0640053107 -0.0204736972 -0.0193674718 0.0711869615 0.0019276117 -0.0460726675 0.0225530918 0.0376152541 -0.0440092749 0.0282253683 0.0199406242 -0.0330043562 0.0311774188 0.0121096886 -0.0220507842 0.0204460049 0.0275403847 -0.0270413636 0.0185846407 0.0442144484 -0.0559042551 0.0317253907 0.0420886322 -0.0446130566 0.0350895785 0.0140682985 -0.0266040879 0.0375770961 -0.0278174486 -0.0074987964 0.0159027303 0.0201255679 -0.0233577908 0.0169686704 0.0477072108 0.0176706389 -0.0494092044 -0.0111596041 0.0389313540 0.0150194525 -0.0276827497 0.0111452511 0.0376741772 -0.0428894352 -0.0582372509 0.0404314847 -0.0478687603 -0.0004048270 -0.0220867829 -0.0086115627 0.0238023794 -0.0249736543 0.0063906314 -0.0468152035 -0.0381337197 -0.0523091051 -0.0387165455 -0.0646102441 -0.0536359217 -0.0910355866 -0.0283225988 -0.0821999242 -0.0746377894 -0.0733710598 -0.0928100708 0.0546286410 -0.0583301573 0.0394734755 0.0215704121 -0.0757375616 0.0138361887 0.1044782658 -0.0672267886 0.0766569489 0.0422208512 -0.0933108901 0.0382591634 -0.0107307254 -0.0012720264 -0.0046017518 0.0236018201 -0.0032722291 -0.0511479278 -0.0655818183 -0.0093913028 0.0682786453 -0.0649610262 -0.0229731581 0.0786625412 -0.1143392221 -0.0035337174 0.1172644449 -0.1130227205 -0.0247477052 0.1497696116 0.0507233239 -0.0219569033 -0.0844170123 0.0041892618 -0.0317069330 -0.0190814986 0.1013948597 -0.0262436395 -0.1446973533 0.0174834728 -0.0421924558 -0.0338086422 -0.0545645371 0.0736676412 -0.0081372130 -0.0298937710 0.0411123863 -0.0053137515 -0.0971987833 0.1037534989 0.0443097774 -0.0611047207 0.1121430248 -0.0658270201 -0.0278622553 0.0321412338 -0.0196918387 -0.0460403443 0.0309517257 -0.0152540162 -0.0099139195 0.0280586231 -0.0272313782 -0.0347197522 0.0342227962 -0.0357148655 0.0120695309 0.0079628772 0.0293227635 -0.0115291935 0.0193637320 -0.0307435309 -0.0102693208 0.0187603613 -0.0280727378 -0.0032871952 0.0009886212 -0.0039945627 -0.0109257687 0.0150745903 -0.0055502213 0.0041704009 -0.0075879643 -0.0381702660 -0.0109510228 -0.0024467345 -0.0005455138 -0.0441290686 -0.0177912959 0.0775498807 -0.0239218221 -0.0082071180 0.0194175753 -0.0555528091 -0.0190396875 0.1108663293 0.0386068695 -0.0349222401 -0.0945596214 -0.0181716592 0.0360990889 -0.0442641961 0.0114635654 0.0345513707 -0.0832873982 0.0429196546 0.1099370267 -0.1671048770 -0.0310632104 -0.0042849279 0.0080520312 -0.0900364365 -0.0485164318 0.0693937786 0.1323905630 0.0395405316 -0.0085492390 0.0733970499 0.0344403165 -0.0049305740 -0.0566318690 0.0028808050 0.0232271138 0.0832620653 0.0165772312 0.0717724022 -0.0217714138 0.0514920384 -0.0777955952 -0.0779101432 0.0259075547 -0.0568962597 -0.0010104332 0.0178520038 0.0720733873 0.1475823225 0.0173538260 0.1272518955 -0.0442721303 0.0732117350 -0.1439310322 -0.1393590843 0.0229119162 -0.1044181064 -0.0854522752 -0.0290057214 0.0463840070 -0.0916949589 0.0153725032 0.0129062316 -0.1046435505 0.0386191425 0.0059031691 -0.0766413928 0.0135425352 0.0181876928 0.0013332658 0.0017619587 0.0230806547 -0.0569762062 0.0183021668 0.0442930537 -0.0525844825 0.0003952989 -0.0023620673 -0.0156813671 -0.0056367768 -0.0011130568 -0.0189806015 0.0132120794 0.0463656050 -0.0720675033 0.0253857662 0.0624745786 -0.0615099177 -0.0108377965 -0.0236968393 -0.0008325005 -0.0156327228 -0.0162629301 -0.0051659511 0.0177789577 0.0648578461 0.0324735072 -0.0019494084 0.0234174574 -0.0263933311 0.0337372051 0.0989176187 -0.0243587566 0.0238806357 0.1067827239 -0.0077194088 0.0115211893 0.0045906907 -0.0097092250 0.0158182036 -0.0320618475 -0.0061905877 0.0162831286 -0.0292031221 0.0104424030 0.0017553406 -0.0236885590 0.0098214163 0.0009340583 -0.0079859048 0.0173530310 0.0094222868 -0.0039322712 0.0055790298 -0.0091122928 0.0021608990 -0.0104014621 -0.0429563618 -0.0029794584 -0.0085417735 0.0227653158 -0.0264453782 0.0448561086 -0.0510804797 0.0444350091 0.0250656569 0.0157354120 0.0017129781 0.0097717021 0.0093374232 -0.0007264326 0.0226257888 0.0036335298 -0.0120799871 0.0119375490 0.0139546937 -0.0156627495 0.0028238587 -0.0431835972 -0.0090102347 -0.0010917024 -0.0070397717 0.0377556408 -0.0241531273 -0.0519753523 0.0516924713 -0.0012966072 -0.0321248838 -0.0246270162 -0.0258989282 -0.0885679221 -0.0300093562 -0.0086484127 -0.0587735860 0.1039892673 0.1124213974 -0.0641750832 0.0041221670 0.0719336741 -0.0885384019 0.0790181716 0.0477501480 -0.0369067200 0.0822636222 0.0905492848 -0.1089385666 0.1143260381 0.0908191905 -0.1126954990 0.0969796614 0.0601151261 -0.0713124255 0.0686693777 0.0340413356 -0.0428509726 0.0653183547 0.0302321728 -0.0180063942 0.0678534904 0.1118134600 -0.1329375505 0.1313919822 0.0986210550 -0.1167682183 0.0918593070 0.0290103659 -0.0185411449 -0.0077629663 0.0085072092 -0.0193210926 0.0454781898 0.0024239674 0.0281721931 0.0469882143 -0.0004095904 0.0298649480 -0.0069560228 0.0063760937 0.0379466052 -0.0139387385 0.0029298078 0.0323742340 -0.0120296520 0.0089766633 0.0337977798 -0.0099519397 0.0027084255 0.0251143073 -0.0025505229 -0.0067884590 0.0308164934 -0.0038178921 0.0075021324 0.0405368034 -0.0155899609 -0.0178708999 0.0017529873 -0.0001156439 0.0126430945 0.0326429126 -0.0119143230 0.0001020584 0.0223923821 -0.0012844971 -0.0401959634 -0.0203549968 -0.0266540567 0.0720880473 0.0334208304 -0.0605644204 -0.0344005632 -0.0151101561 0.0063664186 -0.0230100848 -0.0123783221 0.0057165833 -0.0256075827 0.0144491483 -0.0573762890 0.0110972098 0.0044050632 0.0115328924 -0.0611554885 0.0156215637 -0.1132783063 -0.0131188509 0.0019299303 -0.0303881427 -0.1167452143 0.0270100527 -0.2022907476 -0.0323431821 0.0034056099 -0.0608518960 0.0702519586 -0.0088220980 0.1050732821 0.0689806281 -0.0108864302 0.1072856311 0.1226850337 -0.0180866203 0.1736481714 0.1230756228 -0.0192284230 0.1972800881 -0.0312996351 -0.0157377485 0.0371948031 -0.0333926583 -0.0184727531 0.0556774544 -0.0266543220 -0.0307625898 0.0130286037 0.0205186884 -0.0487646706 -0.0599547388 -0.0464489565 -0.0274730892 0.0306454555 0.0409295343 -0.0583088340 -0.1034640628 0.0022870562 -0.0347146723 0.0052840141 0.0397943877 -0.0505714448 -0.0770355380 0.0137992136 -0.0358260710 0.0112584656 0.0808446081 -0.0625685932 -0.1422366130 -0.0087111596 0.0497811477 -0.0530315925 -0.0441035926 0.0848104899 -0.0800546682 0.0436500828 0.0740036537 -0.0553140512 -0.0225911735 0.0243078652 -0.0403534305 0.0080935711 -0.0064367065 -0.0104646889 0.0327900989 -0.0055011163 -0.0149340411 0.0028995679 -0.0110031934 -0.0052661923 0.0020378910 -0.0193180746 0.0022718735 -0.0313351987 0.0457785676 -0.0098737065 -0.0656744626 0.0623860195 -0.1129414573 -0.0594463209 0.0603762660 -0.0915298295 -0.0231083618 0.0292100010 -0.0322467738 -0.0061413802 0.0384491239 0.0175362418 0.0173463712 0.0092874271 -0.0307643466 0.0146168995 0.0137195129 -0.0358942463 0.0231882639 0.0022041761 -0.0205418893 0.0367702764 0.0027870982 -0.0507419642 0.0148657063 0.0017801747 -0.0034924985 -0.0019135202 0.0088323638 0.0096454876 0.0290122256 0.0564565675 0.0552204915 0.0116034156 0.0051927608 0.0267575599 -0.0290959570 0.0104628182 -0.0174749129 0.0523156945 -0.0477820470 0.0499301844 0.0136807874 0.0257730754 0.0180216695 -0.1128194600 0.0456665484 0.0032692429 -0.0602081127 0.0244899730 0.0177410381 0.0392940539 -0.0013045112 0.0232476564 -0.0573425313 0.0269304808 -0.0149725173 0.0160570793 -0.0150899832 0.0688219448 0.0594776344 -0.0193851551 0.0692490139 0.0131795501 -0.0019147936 0.0034531422 -0.1044020821 0.0401314090 -0.0514337002 0.0326334039 -0.0300192331 0.0995981341 0.1038828827 -0.0257202257 0.1002206897 0.0201849927 0.0279978046 -0.0035853312 -0.0025487101 0.0199573408 -0.0386744207 0.0141895617 0.0011592460 -0.0542227443 -0.0124825737 0.0070363272 -0.0397968759 0.0128109726 -0.0095214935 -0.0448894848 -0.0187453868 0.0188024961 -0.0451482180 0.0068879325 -0.0174642318 -0.0428759026 0.0219055283 -0.0252409310 -0.0429175393 -0.0074944508 0.0149879152 -0.0448331651 -0.0312864880 0.0350321480 -0.0486258812 0.0091040378 -0.0301291423 -0.0470597448 0.0366131858 -0.0442883908 -0.0422182630 -0.0129136201 0.0291142528 -0.0425508502 0.0211089718 -0.0164377667 -0.0433325995 0.0460374475 -0.0281155930 0.0127821244 0.0431931803 -0.0414784835 0.0176907982 0.0154246996 -0.0341984736 -0.0391836388 -0.0200357361 0.0105323834 -0.0007956497 -0.0227289789 0.0128076612 0.0029288365 -0.0042926873 -0.0210626761 0.0305193770 -0.0082847407 -0.0166872846 0.0054132601 -0.0202774289 -0.0549364892 -0.0116879190 0.0035340165 0.0324392166 -0.0296766836 0.0046240053 0.0038049713 0.0066858256 -0.0448570630 0.0531679433 -0.0295308914 0.0131713240 -0.0443128710 0.0566760574 -0.0059372035 -0.0490164037 0.0022776268 -0.0454604545 -0.0514920369 -0.0344920693 -0.0101178582 -0.0862466073 -0.0157268587 -0.0178047263 -0.0572747160 0.0394829587 0.0163154705 0.1920138628 0.0229834437 0.0254326237 0.0259759456 -0.1927891568 0.0641145757 -0.0224721225 0.0597337880 0.0123768930 0.0856142199 -0.0128002409 -0.0458522082 -0.0376296871 -0.0188805603 0.1432350900 0.0199325219 0.2585028205 0.0101969339 -0.2889290705 0.0319385453 -0.0659483670 0.0653084952 -0.0593401142 -0.0125508801 0.0156681110 0.0407650553 -0.0066656453 -0.0001123604 0.0496358976 0.0054563417 -0.0294381855 0.0544917678 -0.0064679777 -0.0473399927 0.0560003051 -0.0030949913 -0.0615819477 0.0684670723 -0.0086821631 -0.0299123775 0.0611430894 -0.0165338710 0.0200257161 0.0393167802 0.0158688711 -0.0290882442 0.0455017370 -0.0334782346 -0.0186875718 -0.0053524314 0.0003694246 -0.0788014715 0.0767882300 -0.0176090424 -0.0290014809 0.0691138347 0.0022525783 -0.0777244439 -0.0101952473 -0.0123771003 -0.0982634646 0.0147262781 -0.0148563173 -0.0856586016 0.0158737337 -0.0342023821 -0.0866922368 0.0061674346 -0.0134277724 -0.0630374480 -0.0211719835 0.0148431735 -0.0866906962 -0.0160465608 -0.0101962766 -0.1055490172 0.0221273016 0.0369029803 -0.0038879059 0.0103157341 -0.0490171784 -0.0843545267 0.0139878262 -0.0119062188 -0.0535536879 -0.0290786171 -0.0962034189 -0.0254434246 -0.0228811812 0.0031380140 0.0180868790 -0.0490715143 0.0550696162 0.0469883233 0.0028703503 0.0700965301 0.0314102795 0.0085626485 -0.0551073647 0.0551613164 -0.0898715847 -0.0475660211 0.0489834141 -0.0738708694 -0.0015159817 0.0605488600 -0.0194443053 0.0633828680 0.0633836800 0.1034195660 0.0126662399 0.0570899610 -0.0279733153 0.1251326628 0.0591175039 0.2006996081 -0.0285971487 0.0656970930 -0.0311554551 0.0462958395 0.0671679969 0.0815725433 -0.0527940565 0.0691216410 -0.0496172560 0.0870228262 0.0659807571 0.1529776358 0.0283018016 -0.0013367248 -0.0505309285 0.0109121663 -0.0013406483 0.0015731615 0.0495759008 -0.0182449470 -0.1030675248 0.0324112453 -0.0303036465 -0.0618067290 0.0747461074 -0.0212006518 -0.1601111208 0.0492937372 -0.0440298997 -0.1052341505 -0.0259893272 -0.0111371086 0.0826619171 -0.0203971454 -0.0234677928 0.0573286340 -0.0562474494 -0.0087864324 0.1611508344 -0.0509044997 -0.0290399602 0.1197952409 -0.0311228771 0.0373508293 -0.0111899512 -0.0600737860 0.0727696815 -0.0205982790 0.0099360851 0.0513268228 -0.0179494558 -0.0483614578 0.0066172177 0.0011685783 -0.0172929034 0.0083506730 -0.0007364478 -0.0124348350 -0.0005655177 -0.0096936226 -0.0207392580 0.0168781265 -0.0035912374 -0.0134379095 0.0044824670 0.0113438497 -0.0055771122 -0.0059001030 -0.0154867212 0.0093882495 -0.0108173671 0.0211983001 0.0052626764 -0.0096365398 0.0117695817 0.0019108584 -0.0003530527 -0.0042445274 -0.0041909618 -0.0035153832 -0.0156920786 0.0039037906 0.0100933887 0.0093018065 0.0065693743 0.0043991744 -0.0019942424 0.0169424431 0.0135909592 -0.0184672693 0.0055865018 0.0117125094 0.0105165981 0.0201874502 0.0137801617 -0.0258322921 0.0015728215 0.0184930929 0.0059148639 -0.0075576258 -0.0073171684 -0.0160027595 -0.0031160765 0.0017398789 -0.0111722721 -0.0165781511 -0.0126494748 -0.0024222152 0.0048765907 0.0058417177 -0.0229553852 -0.0049697665 -0.0070608102 0.0048685951 0.0201708739 0.0056263856 -0.0065759018 0.0128752915 0.0043515499 -0.0057012993 -0.0017100680 -0.0010598863 0.0017354618 0.0160504774 -0.0003442477 0.0067894345 -0.0020541282 0.0091518285 -0.0165002028 -0.0071046015 0.0039383600 -0.0124949107 0.0050395721 0.0008890891 0.0064937150 0.0258887616 -0.0003254299 0.0152537410 -0.0082879064 0.0146957409 -0.0266217555 -0.0166053046 0.0030643899 -0.0197506255 -0.0046816106 -0.0094997748 0.0093323699 -0.0036536799 -0.0078311463 0.0119195152 -0.0053956317 -0.0052914575 0.0125058690 -0.0001090850 -0.0081919188 0.0142143020 -0.0058589228 0.0188687001 0.0110737450 -0.0087439506 0.0120785287 0.0157651179 0.0140392867 -0.0270411499 0.0167955394 0.0127867874 -0.0153286646 0.0143624280 -0.0154887175 0.0298557511 0.0115516875 -0.0179298768 0.0208087706 0.0182248922 0.0253945465 -0.0446758103 0.0195802718 0.0235546148 -0.0278038254 0.0126484571 -0.0288957471 0.0518754229 0.0094844368 -0.0118076077 0.0337083204 0.0074141349 0.0014699037 0.0024004914 0.0031693517 0.0037265693 0.0070441984 0.0016471587 0.0025923699 0.0127231137 0.0242957008 0.0011373883 -0.0046250633 -0.0024594392 -0.0119834726 0.0127647559 -0.0209135476 -0.0035401468 0.0034977514 -0.0140383640 -0.0083243636 0.0050189358 -0.0139662858 -0.0142967043 0.0229629923 -0.0058305745 -0.0103463180 -0.0247127276 -0.0073055705 0.0004219726 0.0073973070 -0.0035545154 -0.0388828830 0.0608605954 -0.0517337996 0.0583468621 -0.0623682307 0.0739307933 -0.0330074243 0.0151857445 -0.0237342914 0.0085756429 0.0210337921 0.0078165842 -0.0283362854 0.0491383079 0.0096016310 -0.0173998657 -0.0363743538 -0.0044486012 -0.0259639490 -0.0330637679 -0.0101667192 0.0115874354 -0.0312759155 0.0051081181 0.1696926225 -0.0864777641 0.2329957084 0.0420280448 0.2820973341 -0.1061526979 -0.1948832146 -0.1781857873 -0.1175441475 0.3374053634 0.0634207839 0.4149688007 0.0261775759 -0.5071694649 0.0448191004 -0.1101623477 0.1703637388 -0.1420576436 -0.0057286568 -0.0154363634 -0.0213540917 -0.0048777519 -0.0289936909 -0.0109421379 -0.0033270892 -0.0324092453 -0.0023835910 0.0006562598 -0.0257344487 -0.0023420369 0.0049662293 -0.0224298467 -0.0096792541 -0.0003814388 -0.0169803561 -0.0192770664 -0.0077801901 -0.0350156128 -0.0104281972 -0.0060350568 -0.0348651495 0.0017605604 -0.0038561510 -0.0008243537 0.0077894586 0.0093268270 -0.0195814309 -0.0087131643 0.0000688178 -0.0116410727 -0.0250048936 0.0009560240 0.0165835415 0.0207617588 -0.0016852780 0.0131733528 0.0153546343 0.0016624571 0.0044943509 0.0143300872 0.0051457171 0.0010607680 0.0200902270 0.0051890909 0.0060583534 0.0248787056 0.0016598109 0.0240040147 0.0198928090 -0.0044469261 0.0169071707 0.0106420819 0.0010215666 -0.0041759240 -0.0050486896 0.0069412580 -0.0043595001 0.0199309192 0.0086618198 0.0038352065 0.0289987669 0.0048402615 0.0141452046 0.0097408805 -0.0169058002 0.0117686985 0.0146055308 0.0166128270 -0.0167698557 -0.0110969549 -0.0149815462 -0.0000137888 -0.0169893328 0.0081299071 -0.0105120155 0.0192502999 0.0021719607 -0.0080406134 0.0011426262 0.0059893330 -0.0179190709 0.0285158078 -0.0104404862 -0.0223545578 -0.0050909102 0.0111773851 -0.0186698325 0.0533023734 -0.0157600062 -0.0258065087 -0.0075460273 -0.0092460257 -0.0154363000 -0.0230792449 -0.0221402277 -0.0210348968 -0.0353508901 -0.0113643441 -0.0151278571 -0.0370329881 -0.0371265676 -0.0237013891 -0.0637242503 0.0116669993 0.0114427209 -0.0090808360 0.0185782548 0.0127222605 -0.0251960754 0.0035272769 0.0219083507 0.0156495939 -0.0122637254 0.0314091595 0.0382707934 0.0050935306 0.0213006237 0.0227268583 -0.0269723870 0.0374475440 0.0685481556 0.0135944633 0.0211693922 -0.0246115884 -0.0044536183 0.0301148163 0.0164220171 0.0162355040 0.0210482723 -0.0457725991 -0.0138379256 0.0351390814 0.0291121777 0.0174177409 -0.0085634393 -0.0090141136 0.0256938751 -0.0246282598 -0.0165357009 0.0068775239 -0.0116094478 -0.0066805169 0.0302537687 0.0061246553 -0.0091355095 0.0095199056 -0.0088918038 0.0180010536 0.0223175950 0.0085991217 0.0318892263 0.0069628385 -0.0299463748 0.0312938751 0.0057163067 -0.0066085974 0.0081937318 -0.0239739715 0.0028425951 -0.0387734209 -0.0048221241 0.0009696951 -0.0065745440 -0.0166449089 0.0040775839 -0.0256018642 -0.0103610764 0.0147011384 -0.0384490226 -0.0188500728 0.0093062352 -0.0423290338 0.0127040305 0.0333160192 0.0137174849 0.0248672540 0.0194750782 -0.0320774439 0.0616562532 0.0406315458 -0.0670011929 0.0382000313 0.0336273228 0.0011935702 0.0650225857 0.0410826077 -0.0799051250 -0.0119574745 0.0661525420 0.0330379702 -0.0186085220 0.0004736033 -0.0252846111 -0.0240123674 0.0073446177 -0.0141401885 -0.0803971902 -0.0360780111 -0.0004359848 0.0165002440 0.0079731233 -0.0520080464 -0.0228122150 -0.0086984818 -0.0042018828 0.0862687668 -0.0364950232 0.0148371026 0.0436748842 -0.0142019483 -0.0003687716 -0.0334681952 0.0171265188 -0.0141685246 0.0557523999 -0.0278750609 0.0281174268 -0.0331478584 0.0366942309 -0.0492667766 -0.0619051533 0.0418007421 -0.0511850425 -0.0053573224 0.0066689286 0.0048447286 0.1039677978 -0.0527849603 0.0620033261 -0.0599513507 0.0594817441 -0.0768166618 -0.1044014601 0.0575437473 -0.0788185149 -0.0266870378 -0.0013597675 0.0018071536 -0.0209550711 0.0037116461 0.0129952848 -0.0274257030 0.0130011464 0.0156458986 -0.0162097548 -0.0003962821 0.0169051608 0.0080235497 0.0001581708 0.0201046348 0.0017012344 -0.0158451928 0.0315502618 -0.0272565267 0.0199518421 0.0054368504 -0.0169645744 0.0241224333 0.0045246778 0.0182275776 -0.0202774322 0.0333676072 0.0090624404 -0.0311888749 0.0442967128 -0.0421091242 0.0366635290 -0.0023273308 -0.0259394092 0.0427105505 -0.0089559662 0.0377736823 -0.0394951227 0.0441604846 0.0188527626 -0.0015610388 0.0204391678 -0.0321426731 0.0280264541 -0.0085598757 -0.0129660175 0.0284922653 -0.0134014124 0.0232999254 0.0173986722 0.0464661528 -0.0039604933 0.0048257075 -0.0041404063 0.0041426820 -0.0060803796 0.0047801506 -0.0047125806 0.0071679900 -0.0064073139 0.0161191596 0.0012901307 -0.0005820925 0.0447961731 0.0122541584 0.0007333894 0.0214162462 0.0461989223 -0.0171939546 0.0042143309 -0.0404847609 0.0099865157 0.0238519900 -0.0428730278 0.0245552154 -0.0420172835 0.0276105829 -0.0559999516 0.0699153668 0.0215110794 0.0246997326 0.0380640271 0.0120883087 0.0105221027 0.0623590089 0.0095815382 -0.0353328756 0.0147769991 -0.0006087750 0.0257474549 0.0374181884 0.1501693728 0.0168957999 0.0173078444 0.0475438633 -0.1257942002 -0.1112947361 0.0088879041 -0.0866401369 -0.0198948418 -0.2027184455 0.0695291110 0.1268220315 0.0291181499 0.0542514215 -0.2575608272 -0.0657031196 -0.2905234824 -0.0092173179 0.3472468081 -0.0405101766 0.0876503140 -0.1514471266 0.1027521891 -0.0045181469 -0.0463330927 -0.0051864199 0.0089654140 -0.1087271347 0.0378688389 0.0153268928 -0.1222850994 0.0553572774 0.0118488683 -0.0969720492 0.0467320696 0.0188191147 -0.0858663957 0.0305850026 0.0049744729 -0.0587142857 0.0034527390 0.0021733006 -0.1269834775 0.0405819212 0.0106773599 -0.1237287843 0.0587809118 -0.0212755055 -0.0084307475 0.0185294956 0.0244601307 -0.0724535540 0.0289637271 -0.0055950019 -0.0299005682 -0.0155122165 0.0141605317 0.0025550170 0.0546054630 -0.0021858294 -0.0208728137 0.0546421201 0.0060062035 -0.0421443055 0.0530989460 0.0056498503 -0.0483337060 0.0606667496 0.0185079040 -0.0179970443 0.0569783174 0.0247475404 0.0168552321 0.0481668625 -0.0103559437 -0.0155358432 0.0454656039 0.0296505757 -0.0303584397 -0.0016241161 0.0010048140 -0.0613895250 0.0653471799 0.0319789190 -0.0179197840 0.0647578698 -0.0566677674 0.0359738494 0.0071376623 -0.0168654989 0.0412580622 -0.0016295332 0.0825805694 -0.0399835880 -0.0222866307 -0.0012114360 -0.0050098523 -0.0348203715 -0.0143147885 0.0012066371 -0.0181773600 -0.0198869266 0.0032637344 -0.0442392073 0.0022318982 -0.0166668939 0.0357477059 0.0083477783 -0.0326546637 0.0370937348 0.0104564350 -0.0177736414 0.0790925267 0.0261038283 -0.0451772315 0.0825924070 -0.0248466405 -0.0136153390 -0.0639014967 -0.0144239695 -0.0300578353 -0.0264767935 -0.0314777731 -0.0132914061 -0.0998205335 -0.0174490158 -0.0403845504 -0.0389389935 0.0520164429 0.0331842222 -0.0662764868 0.0576463303 0.0371687485 -0.0728109679 0.0499459548 0.0576136094 -0.0338830858 -0.0102299562 0.0818315898 0.0609220600 0.0790203168 0.0531822807 -0.0520082054 -0.0378539612 0.0917141009 0.1159871742 0.0124734182 0.0612579763 -0.0120710000 -0.0316258091 0.0835694448 0.0876968875 -0.0096131194 0.0633179136 -0.0156340794 -0.0834850350 0.0974349140 0.1712593285 -0.0134851414 0.0132926479 -0.0043097808 0.0144666736 -0.0232776159 -0.0001723589 -0.0568731341 0.0223387014 0.0268990413 -0.0069252991 0.0510673775 -0.0411912959 -0.0062506420 0.0043705894 -0.0101049262 -0.0101339519 -0.0019673088 -0.0154888866 -0.0046790048 0.0115321798 -0.0148878361 -0.0059822674 0.0025839212 -0.0067898074 0.0034464338 0.0002175492 0.0044958026 0.0020526461 -0.0005469652 0.0061290117 0.0028667716 -0.0007364645 0.0055107713 0.0001258071 -0.0012188876 0.0028273652 -0.0003426978 0.0000852950 0.0006614694 -0.0039127530 -0.0034874875 -0.0005990439 -0.0044456924 -0.0020181188 0.0022776207 -0.0087173411 -0.0033820743 0.0073723200 -0.0052567385 -0.0043952508 0.0011008705 -0.0104352926 -0.0033450141 0.0088298233 -0.0036795030 -0.0025943065 -0.0025928064 -0.0035762755 -0.0004027478 -0.0034801908 -0.0036920655 0.0007634723 -0.0017704324 -0.0025860898 -0.0007726962 0.0019288781 -0.0082153910 0.0057958829 -0.0029267359 0.0016820947 0.0077469017 -0.0012130307 -0.0132874443 0.0069277361 -0.0031169868 -0.0061033865 0.0037489801 -0.0009567438 0.0074231696 0.0007132628 0.0010984008 -0.0025312763 0.0007409105 -0.0025315569 0.0008559230 0.0014290912 0.0041362385 0.0078998748 -0.0000825382 0.0046334288 0.0066283777 -0.0017937590 -0.0006094304 -0.0061245323 0.0008143042 -0.0056005821 0.0000801265 0.0019069614 0.0069687956 0.0115788105 -0.0003195107 0.0072524409 0.0030763535 0.0036217556 -0.0006353058 0.0030150517 -0.0102067251 0.0049856137 0.0032352680 -0.0069004902 -0.0013743021 -0.0014882322 -0.0080325152 0.0032877451 0.0098543456 -0.0144950664 0.0044184444 -0.0051926682 -0.0009785606 0.0033124650 0.0049894158 -0.0163439035 0.0038012720 0.0086764499 -0.0142202634 0.0029435048 0.0031186108 -0.0067142119 0.0047313948 -0.0115406246 0.0068772667 0.0029130817 0.0104085139 -0.0301517219 0.0024933795 0.0111805847 -0.0171891335 0.0015469580 0.0030759054 -0.0042148706 0.0061634930 0.0145606107 -0.0187422731 0.0054163830 0.0140914242 -0.0085580953 -0.0024570421 0.0051042254 -0.0006112275 -0.0028918796 -0.0046346301 -0.0061140187 -0.0025626707 -0.0099408836 0.0065032194 0.0039246168 -0.0150389417 -0.0057949326 0.0033268278 -0.0413889946 0.0324584961 -0.0265422557 0.0112245173 0.0183761853 -0.0123864085 0.0708554220 0.0651085571 0.0008243012 0.0277734786 0.0657501978 -0.0491316669 -0.0096999794 -0.0507607796 0.0077331954 0.0103384407 -0.0514008930 0.0402457863 -0.0265660985 0.0104185614 -0.0130844435 0.1411316355 0.1357103851 0.0470904440 0.0084517219 0.0658261923 0.0496239734 0.1204390972 0.0297809924 -0.0858571780 -0.0406173085 -0.2051204526 0.1529705908 0.0176066111 0.4898601207 0.0891205598 0.1397717071 0.0332719986 -0.4747095805 0.1008531767 -0.1415775419 0.2921901964 0.0356737646 0.1795034103 -0.1028606086 -0.1819818866 -0.2812662762 -0.1316205791 -0.0115900606 0.0064288007 -0.0764995896 -0.0631598893 0.0542573404 0.0128220184 -0.0313881044 0.0168609613 -0.0123313647 0.0026897111 0.0055905140 0.0018548339 0.0032921867 0.0102016967 -0.0021067617 0.0025815381 0.0122949591 -0.0045421663 0.0024888731 0.0122104380 -0.0049147293 0.0000983172 0.0127393002 -0.0035022636 0.0014884783 0.0096677917 -0.0002612768 0.0054667674 0.0106735295 -0.0012886529 0.0031828667 0.0115464862 -0.0041737483 0.0059927331 0.0031429026 -0.0033871672 -0.0021159812 0.0130230764 -0.0047229639 0.0021001114 0.0082934794 0.0004858980 -0.0091869352 -0.0134609834 0.0012540646 -0.0066641564 -0.0114452966 0.0001510944 -0.0046790227 -0.0083195785 -0.0014161444 0.0002175545 -0.0006111955 -0.0060045091 0.0020004673 0.0014753131 -0.0070541884 -0.0133607414 -0.0195143705 0.0038197326 -0.0064026487 -0.0131837794 0.0019434737 -0.0092696924 -0.0156420108 0.0077635152 0.0025191267 0.0027061369 -0.0076470290 0.0074624086 0.0081484759 -0.0105901039 0.0085723773 -0.0009832765 -0.0026250168 0.0070579273 -0.0028007304 -0.0022409488 -0.0214275554 -0.0193657826 0.0130185549 -0.0056250707 -0.0191403845 0.0133763155 0.0015607496 -0.0007955662 0.0029770070 0.0028380980 -0.0011536093 0.0064391258 -0.0033384328 0.0002786222 -0.0060083433 -0.0041776651 0.0007361980 -0.0071583425 -0.0069177061 0.0010057299 -0.0126289705 -0.0086482880 0.0018682968 -0.0154629155 0.0051128841 -0.0011349789 0.0104709645 0.0017792451 -0.0001795050 0.0042597810 0.0086689192 -0.0017168346 0.0161433377 0.0029390742 0.0001848674 0.0065692218 -0.0074058063 -0.0023100579 0.0058122889 -0.0080818244 -0.0026881210 0.0069274197 -0.0069678247 -0.0039425028 0.0030285758 -0.0008330350 -0.0056909017 -0.0072767063 -0.0095055452 -0.0034958182 0.0058989061 0.0021114940 -0.0063411805 -0.0126458306 -0.0037193632 -0.0042069120 -0.0000573775 0.0013697162 -0.0059058723 -0.0106950721 -0.0022836638 -0.0043540348 -0.0000503446 0.0068338337 -0.0070607405 -0.0198182692 0.0117213776 -0.0050221245 -0.0005732649 -0.0247581155 0.0387657214 -0.0140586857 0.0714938295 -0.0129208046 -0.0393564003 0.0065488548 -0.0487844537 0.0463029549 -0.0141305961 0.0216437310 0.0208901287 -0.0153287128 0.0447027045 0.0430346172 -0.0160397998 -0.0016343437 0.0351100699 -0.0113830250 0.0328265878 0.0039094949 -0.0062543316 -0.0001349804 -0.0175578223 0.0026816948 -0.0049271047 0.0151808638 0.0051569961 -0.0054072019 0.0121814053 0.0041878270 -0.0040640427 0.0054968201 -0.0028126669 0.0002355333 -0.0056553249 0.0046035198 -0.0040595592 -0.0030230499 0.0030952628 -0.0024401916 0.0044236853 -0.0047663025 -0.0013632082 0.0047944989 -0.0090995616 -0.0030322311 0.0154959859 -0.0074285797 -0.0012075513 0.0059573736 0.0160840396 -0.0133285928 -0.0209059719 -0.0004590827 0.0076398755 -0.0087232736 0.0086943853 0.0034911926 -0.0209728224 0.0028565276 0.0253415976 -0.0592021734 0.0072880641 -0.0200390055 0.0111772063 -0.0171587335 -0.0051058908 0.0591171278 -0.0647879974 0.0931732264 -0.0277953893 -0.0256831168 0.0528779773 -0.0002317059 0.0361843492 -0.0157961104 0.0435361439 -0.0260539988 0.0511846070 0.0054563057 0.0334976924 -0.0063746245 0.0320745014 0.0593221651 -0.0341737359 0.0497183686 0.0260339771 0.0028021847 0.0390493791 -0.0595446852 0.0852806272 -0.0130166261 0.0493919008 -0.0190240949 0.0343128855 0.0874496862 -0.0570436405 0.0645315966 -0.0041323602 -0.0115126902 0.0373597678 -0.0301015918 -0.0032780975 -0.0114261106 -0.0183610456 -0.0116966879 -0.0324711489 -0.0468820222 -0.0006474764 -0.0143036879 0.0227758589 -0.0189836032 -0.0169416525 -0.0387246324 0.0090363717 -0.0019909032 -0.0273843812 -0.0138773100 -0.0339000904 0.0078627752 -0.0195839918 -0.0349065384 -0.0015792190 0.0003770302 0.0004574582 -0.0535823884 0.0196878653 0.0093256518 -0.0345806021 -0.0297834209 -0.0529634307 0.0225428669 -0.0308884055 -0.0485164214 0.0097990589 0.0064371486 0.0170180700 0.0525078921 -0.0314115553 -0.0143846417 0.0583196332 -0.0285992294 0.0547630339 0.0412839116 -0.0249252254 0.0611258474 -0.0081129287 0.0035839972 0.0241710927 -0.0050397572 -0.0099865992 -0.0158563601 -0.0082980687 0.0216386948 -0.0272965990 -0.0043926052 0.0079111405 -0.0127230864 -0.0024046720 0.0087566258 0.0375121261 -0.0009939451 -0.0106824390 0.0302356400 0.0020308638 0.0580273379 0.0285693734 0.0183890257 0.0734457998 0.0196537772 -0.0233850613 0.0445273742 -0.0588683806 0.0121755521 -0.0644850606 0.0110022241 -0.0272611342 -0.0612147461 0.0235079072 0.0457394181 -0.0123854698 0.0048043253 -0.0194031442 0.0195443662 0.0529040807 -0.0412687524 -0.1544679858 0.2022038763 -0.0283823571 0.3952844386 0.1381928085 0.0858953075 0.0338470030 -0.3015207533 -0.0884695137 0.1643544769 -0.2685018915 -0.0304883791 -0.1618388260 0.1388090045 0.2016505444 0.3056199640 0.1604660975 -0.1317280615 -0.1020370412 0.0401059841 0.1017691725 -0.0034830249 -0.0340208987 0.0926179406 -0.1752104136 0.0789373330 -0.0078132739 -0.0088369198 -0.0359477331 -0.0148879662 0.0027376962 -0.0420974289 -0.0096298045 -0.0078649057 -0.0292802942 0.0030608239 -0.0195363700 -0.0188910525 0.0154406909 -0.0370177773 -0.0141355920 0.0105927930 -0.0344394387 -0.0211565498 -0.0246520863 0.0172413806 -0.0509791904 -0.0127144762 -0.0075265042 -0.0261039841 0.0017047781 0.0046938095 -0.0004897033 0.0259892441 -0.0521835936 -0.0041207397 0.0224749805 -0.0502636498 -0.0155713988 -0.0087528298 0.0092063208 0.0201838193 -0.0025273573 0.0180001400 0.0108640526 0.0027151720 0.0176556582 0.0070843556 0.0095009417 0.0187053807 0.0103120381 0.0030428293 0.0131774902 0.0182669711 -0.0146180620 0.0083140756 0.0233477085 -0.0018567267 0.0215925277 0.0083687457 -0.0074307499 -0.0033910727 -0.0029123473 0.0156117277 0.0202914678 0.0069690723 0.0063402881 0.0140279223 0.0192170345 0.0188243307 0.0232987979 0.0035834571 -0.0186420073 0.0135661735 0.0136031702 -0.0031492881 -0.0198087687 -0.0040181369 -0.0253031954 -0.0098824911 -0.0081135859 0.0122668524 -0.0100431722 0.0267743799 0.0054830248 -0.0082875773 0.0109317396 0.0104414826 -0.0149017534 0.0325032781 -0.0113948759 -0.0146001323 -0.0081352766 0.0185464060 -0.0163411132 0.0563825738 -0.0181777244 -0.0154678096 -0.0167637938 -0.0098431374 -0.0102801314 -0.0165600023 -0.0260349793 -0.0124068517 -0.0382650159 -0.0148099216 -0.0092225084 -0.0279488593 -0.0455854126 -0.0124543036 -0.0729041308 -0.0022486169 0.0013010005 0.0109300182 0.0032367103 0.0014152539 -0.0078073548 -0.0135116932 0.0072096465 0.0349518628 -0.0136960462 0.0127169192 0.0310361258 -0.0218635887 0.0079289056 0.0518207867 -0.0239634352 0.0185193372 0.0541775765 0.0139692134 0.0055526650 -0.0326186853 0.0058624911 0.0103327146 -0.0129166815 0.0257117345 0.0046354595 -0.0624442661 0.0130293031 0.0126533440 -0.0285443535 -0.0148543672 -0.0277406856 -0.0018777952 -0.0541910568 0.0332806032 0.0091031115 0.0416373420 -0.0427585631 -0.0457820337 -0.0356205303 -0.0900519005 0.0456168868 -0.0022762421 -0.0261722999 -0.0396037783 -0.0011571931 -0.0564006306 -0.0692359038 -0.0046582134 0.0092218694 -0.0577653506 0.0005709430 -0.0403877899 -0.0091958034 0.0061073034 0.0030016982 0.0133310865 -0.0009210910 0.0043577168 -0.0017264178 -0.0010785990 0.0043449329 -0.0012988653 -0.0023435045 0.0023558205 0.0000632068 0.0005061597 0.0024464118 0.0039122968 -0.0069911887 -0.0012825601 0.0026968671 -0.0052322722 -0.0001222672 -0.0006692370 -0.0032019889 -0.0023434604 0.0012948140 0.0020607637 -0.0031314878 -0.0086580492 -0.0034682023 -0.0022965221 0.0006263492 -0.0154973984 0.0067286673 0.0131823994 -0.0039581703 -0.0025828976 0.0025599124 -0.0127053625 -0.0009927180 0.0119660547 -0.0107068497 -0.0166841460 0.0380988593 -0.0151882318 0.0157206618 -0.0067392044 0.0150119670 -0.0260112301 -0.0354637449 0.0755114798 -0.0690070839 0.0105555644 0.0344612501 -0.0412911331 -0.0083754579 -0.0356562516 -0.0021187122 -0.0291442644 0.0264134953 -0.0347108892 -0.0013236817 -0.0196761994 -0.0026615508 -0.0420357593 -0.0519621321 0.0119411122 -0.0495529650 -0.0279785471 -0.0036496399 -0.0225950574 0.0564617802 -0.0510097663 0.0195831543 -0.0293184090 0.0056579598 -0.0548655743 -0.0801007068 0.0225057639 -0.0675698400 0.0025785256 -0.0168643064 -0.0147537256 0.0274757291 0.0014819643 0.0175226654 0.0140360689 0.0125724795 0.0401047753 0.0386482744 0.0010750502 0.0199598384 -0.0149513440 -0.0008438728 0.0267141136 0.0128598587 0.0177471202 0.0008938640 0.0421547371 -0.0190966107 0.0470667110 0.0158054020 -0.0217979054 0.0501912748 -0.0179097172 0.0182250216 0.0006930417 0.0078014488 0.0332329063 -0.0171141973 0.0600643348 -0.0273730172 0.0640701340 0.0174266991 -0.0350353426 0.0698713930 -0.0450196277 0.0345694334 -0.0204731930 -0.0380662211 0.0015175755 0.0265683660 -0.0645736960 0.0299828522 -0.0296542128 -0.0472115831 0.0230148540 -0.0340982653 0.0014773959 -0.0103166293 -0.0159623844 0.0155636064 -0.0112894076 -0.0145248181 0.0216053932 0.0104175563 -0.0222267762 0.0109245078 0.0097408174 -0.0128983719 0.0002735535 0.0159233649 0.0246857313 -0.0037769421 0.0218062165 0.0282892409 0.0020648498 0.0627104186 0.0211309852 0.0170795849 0.0749727675 0.0070357006 0.0106528298 0.0193242011 -0.0642315203 0.0161692334 -0.0737441869 -0.0261117536 -0.0525453964 -0.0363069743 -0.0006450296 0.0736965129 0.0173354848 0.0264184517 -0.0388622646 0.0905981877 0.0651718277 -0.0273259537 -0.0950077843 0.1546475092 -0.0204246933 0.3161955711 0.1036633466 0.0589922178 0.0461517317 -0.2273373067 -0.0144236999 0.1211109434 -0.1626137804 -0.0085324645 -0.0308378500 0.0691158914 0.1004559175 0.2149767634 0.0910870933 0.0440659124 -0.0505125359 0.0863888944 0.0074119113 -0.1893495349 -0.0334210165 -0.0007842162 -0.0497821421 -0.1010166483 0.0068204870 0.0129970532 0.0204579513 0.0143279902 0.0057291804 0.0224941666 0.0109380809 0.0130805584 0.0127691211 0.0033868960 0.0218635086 0.0055659586 -0.0088658109 0.0376133205 0.0014829629 -0.0063867036 0.0362470800 0.0074236901 0.0237263090 -0.0045144553 0.0298547894 0.0127464485 0.0118818668 0.0117584543 0.0088770617 -0.0022215938 -0.0012861461 -0.0184648781 0.0483434665 -0.0067832722 -0.0147544722 0.0485162494 0.0021962605 -0.0017668246 -0.0216568155 -0.0090139577 -0.0024719772 -0.0241595497 -0.0043728233 -0.0026324428 -0.0198892951 -0.0042603376 -0.0049013613 -0.0156567429 -0.0097734780 -0.0000797748 -0.0110780451 -0.0156856465 -0.0014715168 -0.0274423334 -0.0087986723 -0.0018173085 -0.0269047528 -0.0017222646 0.0036094121 -0.0078479240 0.0069412050 -0.0078956868 -0.0134411462 -0.0084733763 0.0022561712 -0.0065899963 -0.0187572809 0.0045132357 -0.0182572391 -0.0018583597 0.0203915084 -0.0132972001 -0.0070194246 -0.0045335373 0.0054317460 0.0106349072 0.0165345342 -0.0074006006 0.0152867998 -0.0061085192 0.0059895096 -0.0115110125 -0.0009074291 0.0044741070 0.0002790143 -0.0101486779 0.0090549478 -0.0226526952 0.0013555061 0.0086855139 -0.0011872761 -0.0185041076 0.0106605060 -0.0416646802 0.0008100152 0.0098549042 -0.0037826796 0.0096377609 0.0050088781 0.0187519218 0.0152998032 0.0065456471 0.0255437209 0.0159686875 0.0037530778 0.0294450174 0.0272655496 0.0064587486 0.0466783236 -0.0035782438 -0.0023476598 -0.0030966715 -0.0076095257 -0.0027930036 0.0093606532 0.0039930279 -0.0069108969 -0.0200016697 0.0080049790 -0.0112388199 -0.0243643147 0.0078782117 -0.0070707785 -0.0283017252 0.0165361018 -0.0151522277 -0.0424487090 -0.0119189582 -0.0059409329 0.0206882434 -0.0033158029 -0.0098166401 0.0013211410 -0.0188445970 -0.0054224778 0.0396164243 -0.0044697190 -0.0118456598 0.0054156786 -0.0110313218 -0.0735873004 0.0347807837 0.2112275783 -0.3403255762 0.1173116843 -0.3508762480 -0.1087896406 0.1732460991 0.0728608359 0.1698585309 -0.1491651170 -0.0028883889 -0.0078977908 -0.0712329602 -0.0300732432 -0.0533594214 -0.1101237470 -0.0023387452 0.0475627628 -0.1017240166 0.0054592316 -0.0153595656 -0.0418769213 0.0056015156 0.0042174874 0.0055703128 0.0066991473 -0.0050142069 0.0528969335 0.0064604526 -0.0049351556 0.0365828511 -0.0164705012 0.0071317129 0.0192637220 -0.0313445908 0.0088696303 -0.0180686127 -0.0266986054 0.0119204850 0.0319824950 -0.0265002340 0.0053473612 0.0220204775 0.0043603733 0.0103988345 -0.0005703161 0.0163906746 0.0079411688 -0.0188103107 0.0137042858 0.0107298272 -0.0191883299 -0.0561376077 0.0613425428 0.0462724569 -0.0702312244 -0.0183723979 -0.0382260020 -0.0739306384 0.0113071984 -0.0069885501 -0.1315920476 -0.0650588130 0.0543741107 -0.0475190031 0.0617560065 -0.0890727076 -0.0102743612 0.0572288112 -0.0107777809 -0.0214500163 0.0195872551 -0.0095069637 -0.0032999674 0.0157676774 -0.0069587019 0.0322398633 0.0252670516 -0.0010604933 0.0118664946 0.0008231593 -0.0080667337 0.0072749007 0.0249005353 0.0038314684 0.0311282136 0.0248697499 0.0014094867 0.0354778951 0.0068089106 -0.0107518363 0.0104659086 -0.0065459530 -0.0115717376 -0.0029528837 0.0324254107 0.0144512521 0.0374166073 0.0280328457 0.0066908185 0.0010963833 0.0191950624 0.0065862668 -0.0104157511 -0.0145583598 0.0172721729 0.0011089171 -0.0332490089 0.0157491975 -0.0145117421 -0.0162188750 0.0246688320 0.0188962494 0.0265952279 0.0246428970 -0.0047027207 -0.0007133824 0.0471548318 -0.0085289627 -0.0171538521 0.0126034644 0.0121915109 0.0046655448 0.0064719072 0.0122087366 0.0225359193 0.0433115042 -0.0127561233 -0.0050992577 0.0701854362 -0.0117592986 -0.0239364027 0.0073691152 0.0231066447 0.0048994317 -0.0182423501 0.0166746304 0.0359397577 0.0565196873 0.0288849310 0.0428944483 0.0204077790 0.0665133470 -0.0214031618 -0.0468820411 0.0371077271 0.0257883848 -0.0547756095 0.0177734864 -0.0138582712 -0.0486199099 -0.0093979395 -0.0205027664 0.0211836084 -0.0382338890 0.0179502007 -0.0194159819 -0.0053130879 -0.0040207603 -0.0102156064 0.0062042932 -0.0092667836 -0.0149553296 0.0365826526 0.0197217664 -0.0069022505 0.0128266182 0.0015631410 -0.0369506696 -0.0049870032 -0.0542693249 -0.0021967544 -0.0842120970 0.1016710376 -0.0668411091 0.0085335467 -0.0288800406 0.0589511076 0.0793659003 0.0606864841 0.0223137243 0.0048775140 0.0200222699 0.0235415817 0.0662095301 0.0051956593 -0.0623185707 0.0167364872 0.0504188033 -0.0850014907 0.0502634944 -0.0607886719 -0.0567334232 -0.0207458094 0.0113427744 0.0144771008 -0.1721830101 0.0219314837 -0.1630172415 -0.0410972668 -0.2926729699 0.0866171072 0.1743928847 0.0643491370 0.0722506343 -0.1498762259 -0.0663669282 0.1235990134 0.1537550745 0.0186873457 -0.0192666418 0.0923318683 -0.1447344098 0.1664110501 0.0187171202 0.0085484410 -0.0055815886 0.0383703585 0.0055093701 -0.0140729022 0.0407898400 0.0074283103 -0.0183439841 0.0473338610 0.0215178387 -0.0223799976 0.0302911977 0.0309640104 -0.0186274130 0.0276038706 0.0265399899 -0.0116701976 0.0522098722 0.0060374167 -0.0080143647 0.0383237863 0.0020492072 -0.0106731251 0.0593119681 0.0179097955 -0.0162911089 0.0169093901 0.0334657805 -0.0264101686 0.0314201238 0.0304222140 -0.0197469905 0.0119236568 -0.0388661227 -0.0347255973 -0.0011161746 -0.0624424000 -0.0177917756 -0.0061818617 -0.0648242449 -0.0117072067 -0.0168968008 -0.0607285462 -0.0224793465 0.0033049088 -0.0373897254 -0.0404003861 0.0219362134 -0.0399383381 -0.0400527579 -0.0047038121 -0.0689474786 -0.0149324038 0.0217100815 -0.0140304147 0.0150999500 -0.0294777995 -0.0644177543 -0.0155508757 0.0075276075 -0.0325091805 -0.0426512007 0.0722941783 0.0173282614 -0.0128500660 0.0554152659 0.0141587210 -0.0112764417 0.0078770216 0.0306940107 0.0204771187 0.0669902069 -0.0005669475 0.0328989770 -0.0035833348 -0.0040384532 0.0307911500 0.0020962168 -0.0049617980 0.0487873385 -0.0457647782 -0.0114443610 -0.0165214915 -0.0517852074 -0.0236259892 -0.0322423948 -0.0813509746 -0.0035435701 -0.0468752965 -0.0858047068 -0.0227257249 -0.0833812983 0.0188906958 -0.0245620757 0.0667977135 -0.0110799582 -0.0309576555 0.0311431426 0.0523512458 -0.0313735948 0.0883110378 -0.0049912319 -0.0358822498 0.0385731458 -0.0161964826 0.0055027942 0.0093955584 -0.0175371229 0.0052124479 0.0323752914 0.0091067934 -0.0005581977 -0.0363378806 0.0252205772 -0.0091277409 -0.0585921772 0.0214203241 -0.0012761892 -0.0531511370 0.0506267625 -0.0189818836 -0.1101166947 -0.0274241087 0.0005286712 0.0557004220 -0.0020169553 -0.0061105130 0.0042340023 -0.0463102447 0.0019907816 0.0975033533 -0.0020709834 -0.0104475113 0.0084052307 0.0353642778 -0.0084358578 -0.0088645411 -0.1322459007 0.1945381441 -0.0669802074 0.2945621992 -0.0073516819 -0.1403759511 -0.0147926022 -0.1996342305 0.1593010866 0.0130699098 -0.0301900991 0.0805584350 0.0332902900 0.0602285432 0.1635378923 0.0384406831 -0.1380238743 0.1272557597 -0.0182806674 -0.0115871867 -0.0047029852 -0.0006796927 -0.0024757316 0.0000847282 -0.0021143334 0.0007491268 -0.0193057652 -0.0016137612 0.0005864187 -0.0114092205 0.0076128816 -0.0023580122 -0.0040512372 0.0141660178 -0.0050133332 0.0091693819 0.0094189255 -0.0018310754 -0.0087071211 0.0084644086 -0.0006627498 -0.0041494088 -0.0002819517 -0.0022718874 0.0020284498 -0.0039327024 0.0004195980 0.0041172824 -0.0011224248 -0.0024844611 0.0073548351 0.0193917123 -0.0188959063 -0.0119717800 0.0277507283 0.0025639526 0.0164263296 0.0283716575 -0.0063352650 0.0075334032 0.0525655441 0.0148828488 -0.0024794922 0.0197968343 -0.0194566712 0.0288527982 0.0148352819 -0.0269133269 -0.0189952729 -0.0025224256 -0.0078901843 -0.0296650962 -0.0018020695 -0.0144270077 -0.0251559203 -0.0063995797 -0.0266426400 -0.0133100166 -0.0160753339 -0.0020329549 -0.0262174855 0.0154335037 -0.0357836018 -0.0166787490 0.0063388825 -0.0372130059 -0.0133916009 -0.0113853677 -0.0175813746 -0.0145038971 -0.0257515051 0.0129425419 -0.0299903140 0.0300404218 -0.0474966275 -0.0147568259 0.0115731550 -0.0481057479 -0.0121633732 0.0082478331 -0.0197042441 -0.0136785981 0.0239175019 -0.0166227740 0.0097857103 0.0181461305 -0.0135179151 0.0228449129 0.0342309830 -0.0026676826 0.0051506079 -0.0141848302 -0.0004531312 0.0078752871 0.0228198893 -0.0033115128 -0.0078166152 0.0271924152 -0.0007695780 0.0209065860 0.0008949012 -0.0026973767 0.0233955851 -0.0039013590 -0.0026478625 -0.0084593887 0.0303864379 -0.0060065717 -0.0194660614 0.0375466507 0.0049508369 0.0359383787 -0.0053858766 -0.0034398223 0.0393544416 -0.0162394652 -0.0030762132 -0.0228461300 -0.0327560871 0.0022788024 0.0074811648 -0.0077965343 -0.0202428218 0.0043294671 -0.0099182578 -0.0272737639 0.0068299054 -0.0041104793 0.0092443277 0.0089962229 -0.0215371493 0.0102619082 0.0305955836 -0.0445253426 0.0390620349 -0.0026072615 -0.0334828389 0.0289641008 0.0037882098 0.0116628158 0.0227819916 -0.0143604316 0.1073192323 0.0299070721 -0.0215395726 0.0309884107 0.0684343379 -0.0624809315 -0.0237412516 -0.1021227971 0.0214918432 -0.0835921095 0.1007827402 -0.0657311651 -0.0296448707 -0.0567946602 0.0401487938 0.2655207266 0.1497743121 0.1020585752 -0.0502046463 0.0372753051 0.0007224047 0.2197240161 -0.1022745150 -0.1887862802 0.0623277041 0.2441147198 -0.2140946150 0.1443259824 -0.1225781634 -0.1229101615 -0.0930148488 0.1050672315 0.0977304337 -0.1860081859 -0.0641642993 0.0232445509 -0.0385968646 -0.2686922473 0.0590319280 0.0986993408 -0.1216714472 0.0137827265 -0.2347488190 -0.1098528550 0.0881693563 0.1021992523 0.0260818049 -0.0264287870 0.0848334497 -0.2145209396 0.1386278464 -0.0083153398 0.0016563961 0.0016179649 -0.0172659773 0.0070233461 0.0024751654 -0.0181925037 0.0064636236 0.0038775139 -0.0205016787 -0.0007795372 0.0059935645 -0.0145433942 -0.0038329595 0.0046407682 -0.0129047044 -0.0035456746 0.0030773622 -0.0223444477 0.0074338440 0.0000542644 -0.0161816546 0.0071394648 0.0014675055 -0.0229488592 -0.0052722972 0.0052871659 -0.0095073033 -0.0047967032 0.0075834362 -0.0139610403 -0.0063662495 0.0070520581 -0.0034743696 0.0186758641 0.0030549916 -0.0027602558 0.0220203935 0.0001350477 -0.0048804731 0.0210752182 0.0005402603 0.0016821971 0.0225329238 0.0027622723 -0.0017383104 0.0175613769 0.0068254313 -0.0061123958 0.0215600295 0.0042462415 -0.0027700143 0.0210233493 0.0012648999 -0.0187905270 -0.0003214071 -0.0019618206 0.0060996423 0.0221836010 0.0003798633 -0.0036146077 0.0171429761 0.0060929576 -0.0264276439 -0.0074948317 0.0043851297 -0.0218365395 -0.0066980234 0.0043376813 -0.0190782048 -0.0156898383 -0.0021887351 -0.0329412690 -0.0086507968 -0.0056775440 0.0022056684 0.0012848849 -0.0088358317 0.0010033882 0.0017525394 -0.0145638524 0.0158999919 0.0042648492 0.0054919006 0.0173769534 0.0084837354 0.0097038817 0.0277574321 0.0016121574 0.0149635845 0.0279264776 0.0082493842 0.0254860216 -0.0049464722 0.0083803087 -0.0210953091 0.0042787426 0.0108098268 -0.0107572995 -0.0160056167 0.0106765084 -0.0274792964 0.0018582808 0.0125608702 -0.0138554519 0.0045375816 -0.0018048356 0.0008899466 0.0053311242 -0.0017779614 -0.0057228746 -0.0035308996 -0.0021722659 0.0128184583 -0.0057012796 -0.0019781434 0.0165316914 -0.0092655892 -0.0017287729 0.0173625472 -0.0126682521 -0.0002707220 0.0293886880 0.0105246475 -0.0030107888 -0.0138868214 0.0038815314 -0.0030248147 -0.0023052232 0.0183651417 -0.0036402957 -0.0255314783 0.0059829274 -0.0029917068 -0.0062203398 -0.0045718349 -0.0048416645 0.0305331635 0.1331073270 -0.1879797549 0.0494263220 -0.2091232003 -0.0158425851 0.1239978007 0.0659839892 0.1649292950 -0.0827459445 -0.0176157734 0.0188454185 0.0607597083 -0.0038596194 0.0415478889 0.0793878507 -0.0302047217 -0.0050505861 0.0812053691 -0.0112569714 0.0281795972 0.0547613413 0.0174461923 -0.0269051197 0.0221870329 0.0301977001 -0.0199987080 -0.0094619933 0.0167203017 -0.0164148161 -0.0110507136 0.0060666258 -0.0115188218 -0.0301140624 0.0175854803 -0.0243786139 -0.0115440351 0.0052311276 -0.0087400546 -0.0172650424 0.0088812272 -0.0092989141 -0.0279740037 -0.0066554276 -0.0063304667 -0.0085928997 -0.0115527710 -0.0090616901 0.0094667779 -0.0139901416 -0.0065183258 0.0018852164 0.0112927106 -0.0167080586 -0.0206203935 0.0156895683 -0.0286849047 -0.0176048564 0.0227595898 -0.0123154752 -0.0074014478 0.0602228144 -0.0161145827 0.0323980165 -0.0040889792 0.0208107748 -0.0221930512 0.0055171587 0.0272809060 -0.0324511324 0.0134315775 -0.0290971017 0.0087752035 0.0054660768 -0.0147678557 -0.0010903840 -0.0027471922 0.0125798275 -0.0157107353 0.0141316867 -0.0217701917 -0.0028192665 -0.0174900748 0.0147118782 -0.0117048827 -0.0158658794 0.0222451333 -0.0173895640 -0.0003420943 0.0005349531 -0.0180141909 0.0268960403 -0.0386295662 0.0030602323 -0.0315224387 0.0258206707 -0.0113407662 -0.0285538794 0.0345458966 -0.0235442011 0.0040377406 0.0142729263 -0.0145918682 0.0116612540 -0.0037088840 0.0131756084 0.0119515585 -0.0120983382 0.0271929296 0.0222859599 -0.0031988006 0.0166366531 -0.0109003500 0.0140769782 0.0200770898 0.0250002339 -0.0125559991 0.0165605218 0.0154553787 0.0004074765 0.0282609883 -0.0067033922 0.0157631091 0.0258089848 0.0101159048 -0.0093794941 0.0162712427 0.0331982965 -0.0216807544 0.0150059181 0.0315092330 -0.0118365666 0.0402819840 -0.0174792168 0.0273471729 0.0287904875 0.0105606259 -0.0196049940 0.0107168118 -0.0275653289 0.0264494475 0.0173007636 -0.0124792855 0.0124692999 -0.0370895964 -0.0043217274 0.0176144170 -0.0425192100 -0.0096346833 -0.0012467692 0.0312559652 -0.0027890038 -0.0185854318 -0.0005670908 -0.0191595727 -0.0008634072 -0.0228513038 0.0101751804 -0.0176319455 -0.0177495944 -0.0023156684 -0.0237030880 -0.0027741737 -0.0298759321 0.0377335748 0.0266921363 0.0013859205 -0.0758957669 -0.0028556775 -0.0230194627 0.0080336961 -0.0451747356 -0.0460472353 0.0539582074 -0.0295353702 0.0290267743 0.0235775523 0.0424556117 -0.1082758564 0.0039592715 -0.0468313729 0.0669152625 0.0297229418 0.0755990090 -0.0868949137 0.1456005622 0.0884396166 -0.0590992666 -0.2640107318 0.1178911719 -0.0530742303 0.1366694897 0.0652912133 0.1371332991 -0.1159222134 -0.2050413590 -0.0892751186 0.0538861252 -0.1770513093 -0.0249704344 -0.1056909917 -0.0391071698 0.0170819015 0.1236752274 0.0232740872 -0.0598117950 -0.0020217299 0.0444194540 0.1298603504 0.0856550863 -0.0087440223 0.0738484459 -0.0389518684 0.1463212012 -0.0004774116 0.0021489831 0.0520308622 -0.0261892262 0.0286249452 0.0492375075 -0.0398654531 0.0561096372 0.0342039805 -0.0549201092 0.0468486150 0.0300893265 -0.0459384100 0.0419017272 0.0312768886 -0.0269862125 0.0175730672 0.0426358534 -0.0309749358 0.0178677513 0.0505217591 -0.0366042230 0.0659350945 0.0224945052 -0.0541394069 -0.0149866594 0.0066311272 -0.0417515083 0.0528653375 0.0303154426 -0.0310244598 0.0111339706 0.0533454283 -0.0007650367 0.0101787632 0.0270665722 0.0103855442 0.0263606474 0.0160596981 0.0165390434 0.0243321328 0.0118294511 0.0162842415 0.0206204716 0.0166580555 0.0027373339 0.0076790262 0.0262085402 -0.0041074947 0.0072107699 0.0291253772 0.0126173913 0.0336942363 0.0111455270 0.0045278017 -0.0054010756 -0.0044606382 0.0198200309 0.0238408462 0.0147807417 0.0025262290 0.0034673642 0.0302575394 -0.0808243815 -0.0582490191 0.0008335429 -0.0210033267 -0.0440399213 -0.0119256018 0.0127699940 -0.0334070507 -0.0072308955 -0.0199862880 -0.0116348208 -0.0143093461 0.0091557481 -0.0032084021 -0.0388212482 0.0059047777 -0.0015733046 -0.0364729419 0.0336733738 0.0167088738 -0.0396697431 0.0497499750 0.0331832637 -0.0026265424 0.0508695884 0.0122259675 -0.0565147275 0.0686605422 0.0397000092 0.0149048022 0.0114847265 0.0196794463 -0.0154087206 0.0433126659 0.0350022689 0.0099790514 -0.0058312864 0.0235768715 -0.0070114698 0.0558754238 0.0455422704 0.0393942767 0.0077110423 -0.0046737161 -0.0268397829 0.0032310343 -0.0038437615 -0.0300840855 0.0027649833 0.0064776243 -0.0064953162 -0.0160486499 0.0190476299 0.0173797951 0.0094957751 0.0056239957 -0.0014925164 -0.0265646497 0.0270732944 0.0437629674 -0.0055870668 0.0082527075 -0.0276014900 -0.0171319409 0.0189781330 0.0040974557 -0.0113652726 0.0088121764 -0.0394511147 -0.0284678283 0.0261650728 0.0182998728 0.0388256947 -0.0212960788 -0.0193093701 -0.1744954576 0.2474363197 -0.0738717980 0.3661398827 -0.0292966345 -0.1947861604 -0.0346319604 -0.2766097764 0.1967524124 0.0147191293 -0.0270847399 0.0445243068 0.0301207072 0.0485889622 0.1144117091 0.0367842224 -0.1168549015 0.0825263086 -0.0133295436 -0.0122777447 -0.0291646710 -0.0124385848 0.0150216603 -0.0165141349 -0.0136149303 0.0172857587 -0.0170544438 -0.0053596167 0.0147612394 0.0025470950 0.0251429605 0.0138875334 0.0358231622 0.0218160039 0.0101864578 0.0279156617 0.0468337375 0.0395321166 0.0168970543 0.0269807080 0.0227766427 0.0382520076 0.0532707184 0.0267678894 0.0088328925 0.0476615510 0.0498762973 -0.0278144460 0.0785145182 0.0253794797 0.0073017759 0.0484498765 0.0356009329 0.0254615355 0.0428144273 0.0230457637 0.0391735781 0.0549098269 0.0098408506 0.0184295283 0.0377042261 0.0000316930 0.0183268957 0.0878499911 -0.0073028550 0.0044739975 0.0142350248 -0.0103566369 -0.0148302649 0.0243794686 -0.0420122466 0.0255380485 0.0053618520 -0.0232033671 0.0126638989 -0.0176814060 -0.0007302479 -0.0091672511 0.0143865797 -0.0288600747 0.0138318206 -0.0352444022 0.0125299400 -0.0107530614 -0.0409513535 0.0182969089 -0.0142621999 -0.0171490993 -0.0025843694 -0.0050101944 0.0333481672 -0.0494231978 0.0239453314 -0.0534371649 0.0274756668 -0.0204113678 -0.0568846909 0.0308576516 -0.0227869283 0.0081739378 -0.0004482841 -0.0107795423 0.0122510176 -0.0140199231 0.0027207070 0.0142089312 -0.0157408015 0.0026235234 0.0163124172 -0.0204250477 0.0001910982 -0.0143852052 0.0109737337 -0.0122750622 0.0252516134 -0.0399749905 -0.0002437690 0.0064181600 -0.0067708362 -0.0033160717 -0.0167188724 0.0199131236 -0.0103496333 0.0150534197 -0.0305132682 -0.0033410666 0.0432687305 -0.0620422346 0.0023406092 0.0139436882 -0.0179106265 -0.0017002975 -0.0356665948 0.0446976405 -0.0130438207 0.0267706417 -0.0478063602 -0.0004206485 -0.0307923539 0.0312812094 -0.0170630345 -0.0542897783 0.0308552415 -0.0083445303 -0.0126755593 0.0078863374 -0.0129111019 0.0061191283 0.0285984569 -0.0648865147 -0.0064988611 -0.0063385333 -0.0029899560 -0.0187598966 -0.0015903726 -0.0166616233 0.0092067654 -0.0154986015 -0.0154523892 0.0033431808 -0.0250939275 -0.0118218158 -0.0473092491 0.0391479103 0.0194066441 0.0046705287 -0.1039533548 -0.0064209301 -0.0156421075 0.0059399549 -0.0527504061 -0.0408901469 0.0488262928 -0.0148031167 0.0338926608 0.0517393986 0.0457077486 -0.1280512242 0.0283593641 -0.0676386655 0.0156313663 0.0331574593 0.0727078045 -0.1042076017 0.1231973188 0.0941616642 -0.0633743089 -0.3254841060 0.1406919280 -0.0767795582 0.1346614159 0.0697426658 0.1710749651 -0.1532570913 -0.2256140248 -0.0022887132 0.0039857439 -0.0575444216 0.0065525089 0.0257173906 -0.1058389538 -0.0787390157 0.0225855907 -0.0450359027 -0.1468542905 -0.0125819886 -0.0455438463 0.1751671363 0.2501816460 -0.0141611112 0.1329121151 -0.0858100423 0.2421009534 -0.0145837157 -0.0144728650 -0.0429500163 -0.0057785639 -0.0478350475 -0.0258346121 0.0014426714 -0.0733293779 -0.0105748690 0.0053163327 -0.0717192027 -0.0064387997 0.0093705656 -0.0656234316 -0.0176514424 -0.0071869049 -0.0355768175 -0.0354475140 -0.0102362617 -0.0487238235 -0.0278087614 0.0009842271 -0.0772608635 -0.0082978680 -0.0092281912 -0.0004895417 0.0142035635 0.0152035339 -0.0695993092 -0.0137618412 -0.0141238992 -0.0230188058 -0.0419797043 -0.0530139185 -0.0046791206 -0.0621421816 -0.0863151605 -0.0433288040 -0.0447887569 -0.1044752221 -0.0248193607 -0.0379644631 -0.0784016468 -0.0149870715 -0.0383333700 -0.0348591222 0.0245810585 -0.0542289040 -0.0620850352 0.0132665984 -0.0589750614 -0.0861621789 -0.0616947470 -0.0276268624 -0.0846445244 0.0504481760 -0.0111159443 -0.0715841706 -0.0333678400 -0.0415464956 -0.0317980063 0.0485747880 -0.0764234997 0.0060682180 0.0511621432 0.0167211889 -0.0425484144 0.0345648296 0.0302551890 -0.1108863883 0.1079990593 -0.0010024137 -0.0273779033 0.0761042823 0.0081497655 0.0096455389 0.0082738136 0.0364197763 0.0184022497 0.0071458848 0.0287223914 -0.0055892951 -0.0086492962 0.0433080969 -0.0242084143 -0.0245117737 -0.0007338551 -0.0135196977 -0.0062936430 0.0683788683 -0.0409541606 -0.0334482082 -0.0114384231 0.0062556486 -0.0118041218 -0.0045873956 -0.0250955928 -0.0255148550 -0.0319285032 0.0168393635 -0.0141751399 -0.0168521135 -0.0435124389 -0.0357521596 -0.0715855695 0.0287474202 0.0063675654 0.0423874866 0.0392884987 0.0071103279 0.0448846612 0.0203364486 -0.0268938772 0.0191955141 0.0479755043 -0.0654077029 0.0022206933 -0.0075117887 -0.0239715881 0.0034570971 0.0490939293 -0.0874247406 -0.0276641357 0.0617612242 -0.0361984012 0.0562066064 0.0623088606 -0.0670074359 0.0226747286 0.0927362659 -0.0389299446 0.0800312216 0.0775368674 -0.0858649588 0.0127230631 0.0253082641 0.0117242334 -0.0311101691 0.0680100062 -0.0634563872 -0.0581601253 -0.0319439861 0.0246349489 0.0112664708 0.0624885195 0.0858638123 -0.0712953388 0.0042369512 0.0022030925 0.0484326336 0.0271693991 0.0320957887 0.0722588845 -0.0161617410 -0.0294995521 0.0764535607 0.0112096577 0.0151950325 0.0383162737 0.0024998167 -0.0038694167 0.0017833441 0.0074102403 -0.0011109757 -0.0038781868 0.0065388980 -0.0009992090 0.0026095476 0.0114426970 0.0010447157 0.0086095067 0.0113925087 -0.0034982407 0.0076086721 0.0168704867 0.0113565267 0.0032961217 0.0124242453 0.0051192446 0.0067795647 0.0227446013 0.0069500473 -0.0042263545 0.0180458700 0.0158947934 -0.0113170943 0.0316369990 0.0064118638 -0.0042073730 0.0168881448 0.0095944264 0.0075911984 0.0153180964 -0.0014001811 0.0081253572 0.0186141197 -0.0013587418 0.0046980038 0.0161812092 -0.0061484615 0.0098091038 0.0256956522 -0.0022790057 -0.0026884930 -0.0018515434 -0.0035905685 -0.0183833812 0.0212110834 -0.0133704248 -0.0067288811 0.0088021419 -0.0092778821 -0.0095324251 -0.0147105420 -0.0079698930 -0.0080408454 0.0144683112 -0.0151187910 0.0033846849 -0.0178863628 0.0056167644 -0.0266325043 -0.0248590758 0.0000318827 -0.0214689848 -0.0098627572 -0.0064844641 -0.0023733163 0.0290771158 -0.0197264872 0.0145710108 -0.0294665900 0.0155785518 -0.0407371913 -0.0424474311 0.0051498330 -0.0331014713 -0.0059101603 -0.0022970824 -0.0095169344 0.0028228881 0.0067423790 0.0024155595 -0.0029119064 0.0101068909 0.0122722344 0.0106123587 0.0120781145 0.0022064705 -0.0059284601 -0.0047569311 0.0093598862 0.0036632752 0.0124971623 -0.0051138433 0.0101263392 0.0075599766 0.0137088959 0.0016009799 -0.0039713691 0.0182316232 -0.0070333727 0.0045653554 -0.0034340689 0.0034924057 0.0178193566 -0.0141856952 0.0162800643 0.0143057195 0.0241802387 0.0026026310 -0.0110873612 0.0289624933 -0.0148045029 0.0040357338 -0.0125771069 -0.0112244528 -0.0121273045 0.0113047017 -0.0332932086 0.0136148836 -0.0020807627 -0.0129767772 0.0028392106 -0.0040301949 0.0056179618 0.0140654209 -0.0190586180 -0.0023777394 -0.0060011487 -0.0093227029 0.0038742057 -0.0023940602 -0.0051514151 -0.0136369984 0.0139415255 -0.0121134609 -0.0111753290 0.0174015982 0.0119017288 0.0408688989 -0.0164409371 -0.0076923614 -0.0129179862 0.0885077965 0.0096889981 0.0216055423 0.0089772254 0.0535644932 0.0184727853 -0.0352467377 0.0036831350 -0.0234669888 -0.0357769498 -0.0321582490 0.1411186755 0.0351158614 0.0816302189 -0.0661152919 -0.0092279068 -0.0369453910 0.1135837402 -0.1260223063 -0.1023095138 0.0291067651 0.1934324796 -0.0450889200 0.0347461069 0.0123589500 -0.0142155197 -0.1144600369 0.1187998028 0.0769946885 -0.0173128521 0.0382246911 -0.0346937027 -0.0187471576 -0.0771711274 0.1505637520 0.1447356219 0.0666192300 0.0909027533 0.1420086470 0.0241824870 0.0599753871 -0.1309049075 -0.2207963289 0.0099165290 -0.1168186736 0.0935275254 -0.1917854893 -0.0032271710 -0.0080473816 -0.0026419098 -0.0063910635 -0.0131452213 0.0023001186 -0.0087354730 -0.0129057819 0.0022073052 -0.0119230275 -0.0128258042 0.0017065061 -0.0083587890 -0.0118590236 -0.0021133027 -0.0085249648 -0.0096169855 -0.0038499794 -0.0078850387 -0.0178841066 0.0029871322 -0.0081890509 -0.0118016686 0.0000301833 -0.0154809802 -0.0053405329 0.0071808330 -0.0059469543 -0.0096711462 -0.0016737348 -0.0120808863 -0.0068935645 -0.0033327878 -0.0104521224 0.0080067724 -0.0198986939 -0.0236122278 -0.0055570996 -0.0117105616 -0.0328978931 -0.0015794302 -0.0076807669 -0.0237475673 0.0016971519 -0.0075222746 -0.0101311600 0.0135320491 -0.0141048449 -0.0108691640 0.0166025656 -0.0203208484 -0.0228675371 -0.0126889412 -0.0046328588 -0.0308016612 0.0153121306 -0.0035303913 -0.0220284527 -0.0047246315 -0.0082011654 -0.0118518414 0.0201323718 -0.0215907963 -0.0116327308 0.0008547187 0.0081916296 -0.0214673123 -0.0027865307 0.0113574636 -0.0323205684 0.0298537717 -0.0033304736 -0.0227183335 0.0199842556 -0.0018237451 0.0093808169 0.0006247921 0.0068394185 0.0119069145 0.0005494317 0.0077471199 0.0058271418 0.0007031071 0.0006348202 0.0019152883 -0.0005427696 -0.0080158409 0.0041604088 0.0010445266 -0.0003668347 -0.0036399352 -0.0010184292 -0.0154597928 0.0105223162 -0.0013325584 0.0031115305 0.0045034490 -0.0011962832 -0.0062205541 0.0127375178 -0.0017910145 0.0040742721 0.0012651619 -0.0012301188 -0.0120204497 0.0163039005 0.0000836272 0.0041663152 0.0183264270 0.0004353380 0.0068982256 0.0156605779 -0.0087525070 -0.0035363016 0.0185480951 -0.0192467260 0.0005770390 0.0111693729 -0.0082488622 -0.0116002035 0.0180025312 -0.0258344295 -0.0069949422 0.0192817286 -0.0113177083 0.0204838560 0.0168782475 -0.0190822747 0.0166536804 0.0245307894 -0.0117793358 0.0329058279 0.0149668936 -0.0233555656 0.0244624507 -0.0127501093 -0.0403278508 0.0184150000 -0.2589700997 0.3023745182 0.0139190871 0.3523573259 -0.0691809780 -0.1976831079 -0.1312947546 -0.3702001691 0.2644074391 -0.0048262526 -0.0201050674 -0.0414797835 -0.0231330462 -0.0006130285 -0.0189501706 0.0349110847 -0.0453561345 -0.0475743033 -0.0313018464 -0.0244685924 -0.0819481089 0.0107967992 -0.0141748282 0.0104541814 0.0256293248 -0.0125970094 0.0166514391 0.0188428067 -0.0107989208 0.0143231296 0.0053122905 -0.0038070125 0.0001490994 0.0023881169 -0.0095079580 -0.0077085913 0.0053766657 0.0033952686 -0.0007059305 0.0059856793 -0.0014202160 -0.0064749349 0.0167849372 0.0012609212 -0.0143602971 0.0118348272 0.0053278943 -0.0089940024 0.0207848296 0.0009584151 -0.0143568959 -0.0000022542 0.0114215652 0.0023936050 -0.0089460042 -0.0160878533 -0.0187861054 -0.0039581107 -0.0007994863 -0.0098379429 -0.0090291156 -0.0170105390 0.0094493586 -0.0056967994 0.0154281307 -0.0269871163 -0.0053058525 -0.0124722638 0.0071146682 0.0060355713 0.0141536690 -0.0200330256 0.0060755413 0.0052071774 -0.0138981669 0.0015239793 -0.0113357090 0.0039573510 0.0036188102 0.0048591241 -0.0026207266 0.0078809868 -0.0053009088 -0.0150328414 0.0052291937 -0.0141882618 -0.0079176354 0.0029186411 -0.0046763479 0.0049627755 0.0036848826 0.0155563340 0.0006687518 0.0091291422 -0.0058686597 -0.0220750528 0.0019295694 -0.0209291676 -0.0119849171 -0.0048825237 -0.0141873902 0.0097121708 -0.0040298616 0.0013447703 0.0045660357 -0.0065504050 0.0047044079 0.0055970835 -0.0097990488 0.0126628206 0.0026855316 0.0075424270 -0.0104299016 0.0102898200 -0.0101396487 0.0141805355 0.0039937284 -0.0101380800 0.0132220038 0.0027890819 -0.0005165512 0.0000890094 0.0063633966 -0.0008343030 0.0014903490 0.0076064141 -0.0147909035 0.0195464729 0.0036331190 -0.0128040050 0.0174940055 0.0017311823 0.0028425900 -0.0040257303 0.0063137156 0.0010403038 -0.0013892267 0.0079952116 0.0186935081 -0.0254382252 0.0138769908 0.0040728646 -0.0078848549 0.0037790258 0.0015838128 0.0012260761 0.0022890571 0.0064348685 0.0058023409 -0.0040171153 0.0089145784 0.0016203838 -0.0034456555 -0.0059045410 0.0206091985 -0.0215739152 -0.0207541983 0.0234760631 -0.0181839148 -0.0261774792 0.0220904366 0.0077972706 -0.0333760044 -0.1016274566 -0.0464233465 -0.0429223243 -0.0035351490 0.0506351719 0.0549205767 0.0533979747 0.0795775957 -0.0097426481 0.0255981794 -0.0293187274 0.0223503622 -0.0104610450 0.0104549869 0.0576696294 -0.0640352720 0.0398448762 -0.1982505555 -0.0861448028 -0.1685426107 0.0358085057 -0.3042373275 -0.0816223817 -0.0281355975 -0.0122303138 0.0836294808 -0.1026840777 -0.0084105266 0.0482057998 -0.0262013461 -0.0081408118 0.0768172465 0.2927346066 -0.0584980768 0.3228849291 0.0621125496 0.3732822673 0.0581360333 -0.0857618322 -0.1502081735 -0.0428374229 -0.2480820498 -0.1039583567 -0.1140897354 0.1645258756 0.2632220586 -0.0419679379 0.1781327293 -0.2258446339 0.2209725994 0.0018851751 -0.0065136421 0.0119345595 -0.0097461276 0.0078302452 0.0077615710 -0.0162581464 0.0193443955 0.0021012050 -0.0206214207 0.0154206648 0.0015054047 -0.0144906986 0.0090862678 0.0033850369 -0.0063495239 -0.0041928197 0.0096726047 -0.0118404428 0.0049523494 0.0076496104 -0.0154684917 0.0233711185 -0.0021692132 -0.0189674286 -0.0045007930 0.0027909804 -0.0117253432 0.0112754040 0.0041228204 -0.0051497590 -0.0113675879 0.0160608237 0.0026691691 0.0032430769 -0.0026498205 -0.0035542495 -0.0016625200 0.0027689597 -0.0081053455 -0.0004821319 0.0046957715 -0.0075542958 -0.0013470738 0.0054413616 -0.0026577718 0.0033243935 0.0004100903 0.0057016951 0.0072225959 -0.0044114638 -0.0013420118 -0.0027078461 0.0052191311 -0.0030230582 0.0114244346 -0.0038740658 -0.0086249037 -0.0032675989 0.0062051895 -0.0049815047 0.0050566094 -0.0024563181 -0.0179797932 -0.0163565232 0.0035945514 -0.0154125770 -0.0170151268 0.0039860698 0.0070977945 0.0144290142 -0.0083224895 -0.0035563554 0.0212604906 -0.0110784221 0.0158335688 -0.0041293522 0.0051588067 0.0154544129 -0.0036440754 0.0120166266 0.0094557049 0.0051668102 -0.0215462804 0.0067342026 0.0111382839 -0.0239379630 0.0058338071 0.0055797674 -0.0420966346 -0.0032653483 0.0162150618 -0.0465131838 0.0206717777 0.0011493264 0.0224117769 0.0185369183 0.0092737952 0.0076568325 0.0238106521 0.0005590747 0.0344301475 0.0204387248 0.0150867636 0.0149729658 0.0143922916 -0.0023236079 -0.0159614274 0.0133939784 -0.0021353099 -0.0096073847 0.0197159422 -0.0026828933 -0.0230172003 0.0118268879 -0.0040291209 -0.0070311233 0.0269176521 -0.0032172671 -0.0315814785 0.0120871959 -0.0066396891 -0.0107480519 0.0014058110 -0.0028757449 0.0151199400 -0.0020055218 -0.0026128206 0.0214363348 -0.0069789866 -0.0021786562 0.0319626992 -0.0147624391 -0.0016758809 0.0443948898 0.0288419878 -0.0374791524 0.0076209129 0.0469864400 -0.0585764084 0.0159566069 0.0070185757 -0.0642145527 -0.0080481305 0.0500117047 -0.0251519164 0.0219644559 0.0080871557 -0.0013119037 -0.0141233283 0.0123682198 -0.0420358539 -0.0542152748 -0.0103784000 0.0448776128 -0.0299106359 0.0217292916 -0.0116479367 0.0298046000 0.0342029315 -0.0431034448 0.0303566926 0.0879655019 -0.0377306979 0.0565308672 0.0650170747 -0.0316685823 0.0496923604 0.0247902420 -0.0088200201 -0.0054142449 0.0180532166 -0.0293224619 -0.0265857752 0.0215546503 0.0219713294 -0.0097404878 0.0175159126 0.0033223681 -0.0210755988 0.0419921004 0.0147084464 -0.0237842011 0.0321004671 0.0290354282 -0.0229803337 0.0538363115 0.0133693731 -0.0160456274 0.0097383254 0.0442999826 -0.0058750897 -0.0064211111 -0.0418219171 -0.0585333504 0.0089856803 -0.0005421158 -0.0329290474 -0.0102065055 -0.0545643194 0.0282005267 0.0095280635 0.0406620041 -0.0807662626 -0.0328000751 0.0158635796 0.0621247135 -0.0258465310 0.0484102994 0.0200977672 -0.0085190836 0.0358439745 0.0286540574 0.0267529882 0.0190647553 0.0348784216 -0.0001678880 0.0265183419 0.0290397446 0.0098147304 0.0230851842 0.0395822280 0.0292117687 0.0173028287 0.0392145455 0.0288921511 0.0195647322 0.0340843571 -0.0092389149 0.0291111087 0.0220255728 0.0099917383 0.0227835680 0.0454851811 0.0456175345 0.0097203322 0.0493946881 -0.0152214982 -0.0018289685 0.0437176812 -0.0515556963 -0.0427722866 0.0020863374 -0.0327185807 -0.0461636264 -0.0473164920 -0.0850890626 -0.0561622281 0.0006582400 0.0237691096 0.0089224163 -0.0283695074 -0.0610842254 -0.0350764278 0.0405410871 -0.0621863319 -0.0534588086 -0.0590557665 -0.0041038373 -0.0173898070 -0.0740897401 -0.0019322843 0.0020843371 0.0325765176 -0.0779922249 -0.0396439050 0.0834057054 -0.0815897352 -0.0794467387 -0.1002640899 0.0176914615 -0.0169222031 -0.1243067924 0.0240957591 0.0260259421 0.0765852582 0.0655689296 0.0344792203 -0.0355453441 0.0547041445 -0.0080244390 0.0141765007 0.0455171563 0.0216944407 0.0105151563 0.0131122236 0.0287422516 -0.0160001369 0.0013938409 -0.0070940717 0.0032828797 0.0166749553 -0.0168819066 0.0165735265 0.0146713498 -0.0009218629 0.0029222121 0.0141325909 0.0050252097 -0.0059772295 0.0292985979 0.0528221884 0.0138293087 0.0145644818 0.0482087381 -0.0099282668 -0.0083029489 -0.0193966927 -0.0165970640 0.0304857001 -0.0410463698 0.0287784976 -0.0089996658 -0.0048891060 -0.0175862018 -0.0007866187 0.0305540041 -0.0105858390 0.0969877547 0.0465720860 0.0599284408 0.0062743634 0.1353049446 0.0173222439 0.0423215203 0.1286140221 -0.0592619843 0.0507908550 -0.0273122104 -0.0339759987 -0.0562671025 0.0689061433 0.0575097594 -0.0967570946 0.0211292743 -0.1022153237 -0.0189870267 -0.1391310303 0.0104837896 0.0640151753 0.0479265813 0.0246322938 0.1597558060 0.0509839877 0.0395592872 -0.1141598385 -0.1601815439 0.0262094786 -0.1043739178 0.1270587269 -0.1541242405 0.0015250655 -0.0230291623 0.0313018238 -0.0370915619 0.0170596435 0.0226271725 -0.0575382183 0.0487323501 0.0072238877 -0.0734922056 0.0342749303 0.0059174882 -0.0504727828 0.0141735207 0.0091206429 -0.0269010737 -0.0214663065 0.0254407748 -0.0464223364 0.0067003127 0.0214220685 -0.0523556490 0.0597191996 -0.0073073041 -0.0742306096 -0.0130755149 0.0120696959 -0.0390789713 0.0213894183 0.0126415563 -0.0260586938 -0.0419017153 0.0462285045 -0.0089699982 0.0173233538 -0.0134777212 -0.0320335940 -0.0061631433 0.0006287938 -0.0454802506 -0.0074951849 0.0071479621 -0.0342442758 -0.0032284457 0.0081460574 -0.0109401385 0.0225256469 -0.0060100868 -0.0049984994 0.0323784943 -0.0165241902 -0.0309414547 -0.0140321350 0.0089450032 -0.0387541023 0.0123321391 -0.0053583852 -0.0359788938 -0.0155164132 0.0101792456 -0.0109091450 0.0334622422 -0.0164472683 -0.0708813594 -0.0426240442 0.0142171868 -0.0705956797 -0.0401492033 0.0176145265 -0.0257913618 0.0211806570 -0.0105222022 -0.0400086548 0.0268358547 -0.0144557158 0.0584904008 -0.0116994589 0.0237836897 0.0589269139 -0.0097457222 0.0355604708 0.0354011066 0.0127617667 -0.0575819300 0.0201231212 0.0266395959 -0.0814672707 0.0238468588 0.0142728664 -0.1121544653 -0.0172010776 0.0391301954 -0.1557482957 0.0742988390 -0.0006910669 0.0620263942 0.0586120296 0.0202177764 0.0082156732 0.0877824526 -0.0029570659 0.0991514012 0.0604098461 0.0343496426 0.0209244312 0.0320682780 0.0001004752 -0.0338679289 0.0329001015 0.0006856923 -0.0143309742 0.0380911225 -0.0077375427 -0.0491997657 0.0274995311 -0.0205452760 -0.0180770460 0.0452237975 -0.0077027940 -0.0669527629 0.0253030460 -0.0321996678 -0.0296363886 0.0128672207 -0.0113759889 0.0399766626 0.0053744810 -0.0186105471 0.0446977201 0.0019854805 -0.0105279539 0.0818279169 -0.0172009986 -0.0223210429 0.0905175321 -0.0143877446 0.0317895308 -0.0135119260 0.1708776757 -0.2212999935 -0.0023807554 -0.2946660839 0.0643428796 0.1626948741 0.0614776538 0.2790904852 -0.2161743231 0.0075221741 -0.0121073242 0.0193508529 0.0212776728 -0.0214916083 0.0068335619 -0.0101973326 0.0018075719 0.0210196496 0.0189680995 -0.0128007433 0.0416878559 -0.0087872215 0.0031105254 -0.0235782731 -0.0239104554 -0.0006328000 -0.0349959957 -0.0227148353 -0.0008051694 -0.0401524768 -0.0015516674 -0.0030341724 -0.0213393970 0.0024370363 -0.0038468868 -0.0175581205 0.0044078277 -0.0041705845 0.0136591234 -0.0008226913 -0.0034517665 0.0219122726 -0.0245976069 -0.0000502670 0.0409310357 -0.0106933324 -0.0073578128 0.0220770177 -0.0275332431 0.0004035516 0.0368580603 0.0135785057 -0.0046006420 -0.0016634744 0.0092751675 -0.0069919689 -0.0056794792 0.0120629036 -0.0001011069 -0.0016825582 0.0145943059 -0.0145939506 0.0208543651 0.0134079230 0.0145233312 -0.0223306877 0.0054854138 0.0336451804 0.0184943685 -0.0127726349 -0.0177302064 0.0672354969 -0.0113973015 0.0029236926 0.0529863411 0.0203882759 0.0293181801 0.0150292042 0.0272916819 -0.0265803527 0.0446713153 -0.0555011555 0.0621746688 0.0323567384 -0.0215606205 0.0640334221 0.0251446130 0.0151201709 0.0188158796 0.0111641583 0.0444592070 -0.0696325571 0.0464580708 -0.0973190537 0.0956492703 0.0293690561 -0.0270357030 0.0895011739 0.0270274884 0.0138027301 0.0193758027 0.0108969581 -0.0082267423 -0.0456158226 -0.0030495696 0.0101797206 -0.0518495184 -0.0407229378 -0.0351070439 -0.0585423144 -0.0148282183 0.0076896806 0.0059941135 -0.0531037841 -0.0261591907 -0.0475460188 -0.0007501236 -0.0187576026 -0.0597254818 -0.0569292601 0.0031694201 -0.0206847335 -0.0725817135 -0.0005901738 -0.0108101856 -0.0110033607 -0.0301849226 -0.0546391998 0.0209686971 -0.0264221647 -0.0893846631 -0.0841258254 0.0104441791 -0.0141833541 -0.1014649366 0.0124447685 0.0106339608 0.0164649571 0.0195283708 0.0382671756 -0.0614325848 -0.0232235840 0.0525060095 -0.0281370430 0.0023445709 0.0515703143 -0.0354409837 -0.0041366641 -0.0152739428 -0.0049119824 -0.0002675452 -0.0209994893 -0.0086336364 -0.0133499124 -0.0228465195 -0.0236268855 -0.0086097051 0.0088320971 -0.0537968910 -0.0417156805 0.0086402206 -0.0159898301 0.0231347923 -0.0142416590 -0.0359622587 -0.0603359737 0.0100311082 0.0276371451 0.0438243270 0.0042111382 0.0820835209 -0.0080000430 -0.0197196478 0.0274645828 0.0500571306 0.0648645455 0.0412947741 0.2032453172 0.1272622355 0.1019610138 -0.2058290492 -0.0005962993 -0.0602061392 0.1549891650 -0.2343745654 -0.1962500977 -0.0427629234 -0.0009891708 0.0672725783 -0.1073974766 0.0287562503 0.0328297440 -0.0530425762 0.0083045629 0.0255548752 0.0173137762 0.0410777645 -0.0521752086 -0.0362768742 -0.1000341273 0.2736903774 0.2619377015 0.0855066673 0.1361440391 0.1791945898 0.1043998837 0.0621821665 0.0462144981 -0.0156257737 0.0349818189 -0.0307856020 0.1753010866 0.0385473020 -0.0016956329 0.0178070373 0.0051168436 -0.0035980096 0.0129778414 0.0155742877 0.0036404733 0.0123831466 0.0279131048 0.0100588101 0.0143578831 0.0286411238 0.0104320571 0.0211151829 0.0236079662 0.0072103088 0.0248882283 0.0089204078 -0.0107366314 0.0109638501 0.0134921866 -0.0014574968 0.0113245468 0.0340890252 0.0074509920 0.0003423218 -0.0022781823 0.0156302389 0.0250678567 0.0251189783 0.0107138769 0.0311009176 -0.0003672239 -0.0007906993 -0.0082366292 -0.0127818556 0.0075500141 -0.0042519681 -0.0229116724 0.0117149210 -0.0058723825 -0.0236135891 0.0113669284 -0.0087816693 -0.0225176762 0.0056492487 -0.0163222959 -0.0112070476 -0.0064245926 -0.0087394106 -0.0101474085 0.0045255708 -0.0012356864 -0.0280840246 0.0098412626 -0.0011541176 0.0032340659 0.0160394941 -0.0086888139 -0.0254828197 0.0072142321 -0.0218453170 -0.0052146756 -0.0285762796 -0.0177662059 -0.0120324951 0.0391932155 0.0009706544 -0.0296228153 -0.0139278579 0.0146917781 0.0121579936 0.0327819797 -0.0109744423 0.0216775196 -0.0202858708 -0.0039924906 -0.0365421368 -0.0220764981 -0.0017411164 -0.0511022296 0.0098696850 -0.0146540056 0.0254825187 0.0206101878 -0.0200728524 0.0416680063 0.0303506236 -0.0186497294 0.0694824096 0.0525341387 -0.0285487450 0.1015952879 -0.0324111198 -0.0040243047 -0.0689276279 -0.0144911517 -0.0142155078 -0.0301648592 -0.0487316832 -0.0000640874 -0.0905422702 -0.0171047651 -0.0204625942 -0.0391255248 -0.0209241743 0.0020149249 0.0536407967 -0.0212741861 0.0041967938 0.0371436584 -0.0256541685 0.0131488821 0.0734807233 -0.0066308940 0.0247233066 0.0308858057 -0.0349303196 0.0129698806 0.0946031205 -0.0033000012 0.0352073791 0.0393456733 0.0082002657 0.0134242544 -0.0289802808 0.0240657286 0.0213981460 -0.0450995701 0.0233137066 0.0122965387 -0.0774502151 0.0561749670 0.0249086065 -0.1085187079 0.0865463579 -0.0657712179 -0.0315341516 0.1785646658 -0.2112515591 -0.0603636729 -0.0290255512 -0.0936792216 -0.0003057970 0.1796687084 0.0624571647 -0.0609850708 -0.0002451534 0.0113952178 0.0546220427 0.0130046615 0.0398983220 0.0788534599 -0.0383478002 -0.0113931076 0.0879368949 0.0233118341 0.0388520887 0.0490997303 -0.0045202226 -0.0020791859 -0.0307710026 -0.0078537544 -0.0061716653 -0.0315717747 -0.0127332630 -0.0047358322 -0.0408684823 0.0076931959 -0.0001630632 -0.0311141101 0.0097812699 -0.0084471325 -0.0354346500 0.0103604896 0.0112085384 0.0251126921 0.0026782831 0.0045183289 0.0296137174 -0.0156236131 0.0146498008 0.0532915368 -0.0000317520 0.0094494238 0.0253971098 -0.0127138029 0.0149369663 0.0460999282 0.0157752645 0.0236263304 0.0067281120 0.0135268435 -0.0175777406 -0.0242887630 0.0142938847 -0.0038340201 -0.0094856787 0.0046971751 -0.0448244154 0.0420365117 0.0216778554 0.0260371508 -0.0513979546 -0.0132365866 0.0053460692 0.0166895187 -0.0005626528 0.0058105646 0.0047947030 0.0011868450 0.0061263377 0.0045634053 0.0074659786 0.0104217204 0.0052671203 0.0043565449 0.0020939255 0.0056466723 0.0004489886 0.0105237719 0.0049112438 0.0067751370 0.0106184092 0.0033792465 0.0086632871 0.0070776844 0.0027780472 0.0062445284 -0.0008294522 0.0063793361 -0.0028753199 0.0130401379 0.0074211538 0.0084171308 0.0108953573 0.0043541753 -0.0073693388 -0.0022038282 0.0146588417 -0.0204021092 -0.0123032276 0.0039855793 -0.0146008569 -0.0126237035 -0.0140107791 -0.0287291336 -0.0278102032 0.0104617332 0.0047369666 0.0126475745 0.0004267443 -0.0172161687 -0.0201749545 0.0294920668 -0.0218147778 -0.0245172884 -0.0108570024 -0.0032439668 -0.0041579345 -0.0177351275 0.0002757266 0.0027322412 0.0252343481 -0.0204815988 -0.0282869841 0.0498877350 -0.0286095490 -0.0310073808 -0.0244410582 0.0048387619 -0.0021764567 -0.0392418101 0.0090724440 0.0134503314 0.0417264964 0.0155365420 0.0316843794 -0.0045219392 0.0164391159 -0.0006911267 -0.0143574663 0.0213336742 0.0118852338 -0.0190339952 -0.0005858917 -0.0080602248 -0.0175132889 0.0089627942 -0.0007588810 0.0161232898 0.0226030028 0.0196641175 0.0191397109 0.0121122703 0.0021935448 0.0424814224 0.0313056832 0.0119393351 0.0175816959 -0.0081927940 0.0000273672 0.0202349323 0.0405605500 0.0571543005 -0.0058253861 -0.0126396787 0.0275572360 -0.0404696447 0.0134440628 0.0178504034 -0.0457487421 -0.0535678728 -0.0952965176 -0.0580889501 -0.1504850098 -0.1434537486 -0.0741118116 0.1883504945 -0.0102496660 0.0105421973 -0.1129072046 0.1760835387 0.1470620397 0.0702208337 0.1793134995 -0.0992825910 0.1045736067 -0.0754385490 -0.0477368233 -0.0553901907 0.0851048264 0.1101721142 0.1005729711 -0.0447352563 0.1588397002 0.0574303301 0.2342429524 -0.2097033533 -0.2501164196 -0.1127020689 -0.1293148155 -0.2453415131 -0.1540180026 -0.0924002309 -0.0324790727 0.0318275611 -0.0564581657 0.0641967648 -0.2566584448 -0.0315617242 -0.0027574499 0.0185988618 0.0074483375 -0.0147524505 0.0184006742 0.0221218381 -0.0075777852 0.0200209334 0.0397015099 -0.0017778921 0.0175217727 0.0417022954 0.0060274459 0.0217633659 0.0340764379 0.0051274793 0.0226149826 0.0141806466 -0.0292652566 0.0147303054 0.0173221032 -0.0128078148 0.0200757722 0.0453400606 -0.0081582816 -0.0056774359 0.0018236317 0.0182045689 0.0275876181 0.0386235325 0.0100006859 0.0267275753 0.0061247835 -0.0138542493 -0.0115864830 -0.0252800226 -0.0129822480 -0.0210257063 -0.0359936896 -0.0083434742 -0.0223290185 -0.0362082043 -0.0025682229 -0.0237301864 -0.0345000240 0.0045874112 -0.0160234684 -0.0234770591 -0.0237919811 -0.0072459471 -0.0209871830 -0.0211126078 -0.0221958543 -0.0406981732 -0.0029318495 0.0015001130 0.0041844490 0.0030098437 -0.0316952820 -0.0375030600 0.0121014382 -0.0168309870 -0.0189339322 -0.0565976717 -0.0331292748 -0.0108744168 0.0340469690 -0.0077906781 -0.0333354327 -0.0402335360 0.0388055190 0.0192466237 0.0405209515 -0.0067155311 0.0354384896 -0.0091354359 -0.0048114706 -0.0378631084 -0.0092732568 -0.0012206826 -0.0586617166 0.0205447236 -0.0193668852 0.0280433185 0.0277967992 -0.0303048264 0.0331229101 0.0408519749 -0.0232022108 0.0809196203 0.0558995071 -0.0424275205 0.0930218785 -0.0184996127 -0.0105967377 -0.0807742123 -0.0067460698 -0.0249447443 -0.0470921463 -0.0308513997 -0.0070508302 -0.1026423871 -0.0121071647 -0.0343210771 -0.0631601110 -0.0206418400 0.0103763990 0.0706496173 -0.0162800250 0.0135842537 0.0553386856 -0.0280756792 0.0179048232 0.0909340546 0.0008772313 0.0227257208 0.0374058857 -0.0450660318 0.0183193407 0.1138202459 0.0034626633 0.0290782355 0.0417605144 0.0241344920 0.0151499419 -0.0213363581 0.0434340825 0.0179044778 -0.0486228649 0.0484253088 0.0132622859 -0.0740316479 0.0858037096 0.0168752262 -0.1267884760 -0.0719535853 0.0286198311 0.0435484923 -0.1292580836 0.1300642695 0.0807598405 -0.0082287611 0.0465755885 0.0288300535 -0.1464392160 -0.0600164260 0.0506526257 0.0207739408 -0.0516954404 -0.0342941409 0.0212167047 -0.0683043908 -0.0503424066 0.0601154821 -0.0417893490 -0.0605045441 -0.0103468595 -0.0789448830 -0.0388883384 0.0015119677 -0.0059366070 -0.0251867485 0.0132092322 -0.0088386697 -0.0099539186 0.0047808280 -0.0064831212 -0.0207838820 0.0112928981 0.0012495585 -0.0246065163 0.0065465763 -0.0070945613 -0.0394655071 0.0081192621 0.0150170634 0.0260582902 0.0060994819 0.0065902931 0.0207925674 0.0048975512 0.0161444021 0.0332172619 0.0110929787 0.0152572087 0.0186357876 0.0112383311 0.0162997302 0.0245859090 0.0052443581 0.0344482891 0.0120733144 0.0012439771 -0.0179894223 -0.0364741386 -0.0028114911 -0.0056652244 -0.0181504126 -0.0253628809 -0.0445857799 0.0198118300 -0.0003281363 0.0171502253 -0.0432348464 -0.0319763631 -0.0445332489 -0.0084978767 0.0228272287 0.0457322143 -0.1089346473 0.0213621776 0.0066634277 -0.0820062777 -0.0273040934 -0.0441046398 -0.0089052910 -0.0338484741 0.0452345966 -0.0560278277 0.0859626721 -0.0863494731 -0.0538817602 0.0353506965 -0.0956764774 -0.0382062238 -0.0130513794 -0.0277970368 -0.0012477287 -0.0554725977 0.1158416051 -0.0533527710 0.1457912104 -0.1339047472 -0.0549019896 0.0390905463 -0.1391083305 -0.0462763308 -0.0373979994 -0.0350017298 0.0047383466 -0.0171394051 0.0567329042 0.0098249921 -0.0385602222 0.0624648202 0.0551045411 0.0025770903 0.0899591642 0.0271628829 0.0056823218 -0.0159144996 0.0904729098 -0.0006216824 0.0831649221 0.0269385701 -0.0101512587 0.0859173746 0.0739536658 -0.0087749964 0.0260364092 0.0970587923 -0.0020394519 0.0217656847 0.0450994902 -0.0102985248 0.1030771579 0.0103972590 0.0025235708 0.1121246853 0.1037043323 -0.0051629643 0.0093378054 0.1198253020 -0.0082065528 -0.0084075308 0.0205138458 0.0188074005 -0.0756154549 0.1053345999 0.0531632399 -0.0900394120 0.0433961429 0.0154114624 -0.0660227068 0.0481370446 0.0071026354 0.0006354152 -0.0142999247 -0.0079218136 0.0181349953 -0.0274664421 -0.0029229409 -0.0001991158 -0.0087230530 -0.0121816283 0.0124755658 -0.0282619884 -0.0227976517 0.0063375560 -0.0095558687 -0.0100214309 -0.0180998310 -0.0242425585 -0.0256613808 -0.0795897566 0.0016225238 -0.0128950752 -0.0391547524 0.0294255045 0.0218635174 -0.0307246845 0.0438658150 0.0352373451 0.0561105998 0.0230064352 0.0857442406 0.0655206685 0.0450972485 -0.1578844692 -0.0083346938 -0.0542982330 0.0611799648 -0.1648557474 -0.0952572608 -0.0828279253 -0.2337102518 0.0891091780 -0.0933000579 0.0519972151 0.0430434000 0.1150031584 -0.1211237419 -0.1175851796 -0.1383927324 0.0207878078 -0.1023462920 -0.0593418713 -0.2243415754 0.1424539237 0.1716234869 0.0508578259 0.0873220919 0.2131745327 0.1103788031 0.0536475365 -0.0255524997 -0.0709461438 0.0440222376 -0.0692027848 0.2000428145 -0.0494287442 -0.0006048246 0.0078467065 0.0048924375 -0.0171870379 0.0137447340 0.0161311113 -0.0132817335 0.0180779251 0.0316094783 -0.0099431251 0.0140013816 0.0336577637 0.0028168281 0.0111073358 0.0282850656 0.0055880157 0.0053336066 0.0128724734 -0.0325767617 0.0105783205 0.0105626574 -0.0168429286 0.0185669546 0.0354540800 -0.0161905694 -0.0100846635 0.0042099940 0.0172216973 0.0146010299 0.0346817461 0.0122888094 0.0025529494 0.0103175241 -0.0118566319 -0.0071060878 -0.0203983879 -0.0178894341 -0.0235682327 -0.0284843121 -0.0158398528 -0.0278832395 -0.0275345906 -0.0058752262 -0.0278770610 -0.0249589694 0.0076045214 -0.0109611537 -0.0172470602 -0.0194523802 0.0025892895 -0.0176156625 -0.0248010185 -0.0232851795 -0.0333118784 -0.0043235971 0.0062651276 0.0002787178 0.0011218159 -0.0384406420 -0.0283958331 0.0177103107 -0.0082945174 -0.0146270784 -0.0527853036 -0.0363595995 -0.0048553631 0.0180355219 -0.0172216878 -0.0218802000 -0.0308009676 0.0416897111 0.0103741033 0.0376071448 0.0114140303 0.0216296759 0.0081337993 -0.0044860687 -0.0194284789 0.0088207758 -0.0016032601 -0.0334863411 0.0220593936 -0.0143618016 0.0142000963 0.0216483388 -0.0238421199 0.0055857291 0.0315922912 -0.0160654214 0.0461750600 0.0309014632 -0.0321992671 0.0319770712 0.0058789444 -0.0120498346 -0.0474964050 0.0055074028 -0.0216399259 -0.0383470681 0.0036557722 -0.0107776422 -0.0579134015 -0.0003604833 -0.0277806761 -0.0531302983 -0.0036500085 0.0101252304 0.0448072518 0.0022484548 0.0125639213 0.0381813400 -0.0066043509 0.0144038087 0.0561417488 0.0108773288 0.0146936922 0.0277328050 -0.0164566924 0.0145027458 0.0675893413 0.0107506966 0.0158185961 0.0295228987 0.0270672273 0.0109311761 -0.0038238239 0.0376386713 0.0115438820 -0.0190985224 0.0424771653 0.0097562151 -0.0332389925 0.0620928227 0.0096803994 -0.0629307411 -0.0289986249 0.0884356278 -0.0597139304 0.0174147928 0.0108035646 -0.0834383164 -0.1002191345 0.1424570599 0.0309860096 -0.0171342369 0.1749861365 -0.1524523532 -0.0124474063 0.0280923041 -0.0323461770 -0.0154519462 0.0178722243 -0.0417215103 -0.0164873795 0.0373629720 -0.0359107308 -0.0067864471 0.0221196938 -0.0158582861 -0.0208572029 -0.0290068812 -0.0009544990 -0.1087924571 -0.0298122835 -0.1077491389 -0.0822440331 -0.0370798997 -0.0820609698 -0.0406231066 -0.0358847392 0.0684580370 -0.0422361840 -0.0337516074 0.0603256653 0.0353711076 -0.0555347183 0.0730205275 0.0460085700 -0.0525098881 0.0682552007 0.0803076021 -0.0683326010 -0.0905589766 0.0137353942 -0.0420468057 0.0045452858 0.1141729251 -0.0685005572 -0.1236746763 0.0703522249 -0.1049884266 0.0570035091 -0.0926862071 -0.0703196975 0.0445565574 -0.0094051161 -0.0202790045 -0.0060210256 0.0235778709 0.0353060201 -0.0581532454 -0.0406680764 0.0410821173 -0.0484886361 -0.0297520841 0.0353735655 -0.0037735725 0.0015637805 -0.0174867485 0.0034586478 0.0021247470 -0.0063420427 -0.0041835796 0.0024827030 0.0360498516 -0.0176991167 -0.0164775783 0.0090815557 -0.0250779292 0.0291365535 -0.0096043141 0.0160267658 0.0234914926 0.0177626843 -0.0047307774 0.0076228309 0.0151264320 -0.0273073275 -0.0238281419 0.0063700204 -0.0323211102 0.0502581716 -0.0281460536 0.0469054673 0.0390318587 0.0159091747 0.0060095033 -0.0211480230 0.0141674646 0.0022937341 -0.0329547221 -0.0138978580 0.0124446006 -0.0267999730 -0.0217277929 0.0052741388 -0.0357025747 -0.0353333791 0.0334303079 0.0028321382 0.0284105317 0.0356789374 -0.0191877442 -0.0197508079 0.0683993822 -0.0240102100 -0.0390136626 0.0198031019 -0.0034859669 -0.0049134356 0.0111574962 0.0003464160 0.0136928159 0.0637836267 -0.0281815666 -0.0274653340 0.0997902612 -0.0245859833 -0.0600381326 0.0052580305 0.0069094103 -0.0014638471 -0.0182941464 0.0074971149 0.0296289531 0.0816898880 0.0124432989 0.0597876975 0.0276790626 0.0620623973 -0.0293915005 -0.0504851007 0.0271672012 0.0064471565 -0.0532556157 -0.0179472966 -0.0154381978 0.0157392696 0.0009263289 -0.0185631584 -0.0075916699 0.0132081076 -0.0030978613 -0.0062039134 0.0085307997 0.0133987180 -0.0247325044 0.0052385338 0.0195196768 -0.0129020045 -0.0120075190 0.0261419701 -0.0092283519 -0.0128606821 0.0002087832 0.0316715746 0.0157358346 -0.0007883879 0.0106998826 0.0178924152 -0.0126103910 -0.0100836202 -0.0024382980 -0.0265798488 -0.0234436895 0.0054867980 0.0636966234 -0.0079760324 -0.0659439273 0.0286057114 -0.0063519237 0.0020796450 -0.0214407526 -0.0127643304 -0.0039270456 -0.0245357795 0.0728181143 -0.0706703700 0.0184697005 0.0365311966 0.0102520814 -0.0064537054 0.0317826362 0.0127760054 -0.0008868186 0.0151205560 0.0036532117 -0.0065073789 0.0393712262 0.0483706460 -0.0106034094 0.0059454418 -0.0030075804 -0.0256975562 -0.0167025257 -0.0202011386 -0.0363174000 -0.0140737786 -0.0004241055 -0.0290780103 -0.0469235916 0.0113338103 -0.0034819191 0.0196039809 0.0307007575 0.0050507800 0.0085426520 0.0337745900 0.0346320308 0.0041006825 0.0518594351 0.0726245498 -0.0072783401 0.0287897925 0.0837804310 -0.0000403777 0.0358547120 0.0441350299 0.0110652805 0.0440447972 0.0006475888 0.0167145946 0.0193958686 0.0292577432 0.0241850427 0.0806603369 0.0268024190 -0.0273150669 0.0104735489 0.0992706864 -0.0146474220 0.0563847479 0.0402293824 -0.0050311635 -0.0356800472 0.0118946834 -0.0072076240 -0.0263381758 0.0473465777 -0.0171822102 -0.0401844006 0.0870607237 -0.0204671956 -0.0159060304 0.0803794089 -0.0047637843 -0.0353615698 0.0365822492 0.0124563305 -0.0529486055 0.0209252693 0.0016592001 -0.0059985837 0.0436492163 -0.0003503323 -0.0851804267 0.0557785008 -0.0246130620 0.0086462195 0.0840652184 -0.0194085177 -0.0616787653 0.0371430204 -0.0034098804 0.0722952638 -0.0102791667 -0.0286591080 0.1117899043 0.0007378753 -0.0444115708 -0.0986404781 0.0268397034 -0.0197842449 -0.1136679173 0.0363862503 -0.0292288141 -0.0918129199 -0.0312653612 -0.0725720400 -0.1068080701 -0.0295454201 -0.0179087056 -0.0302140021 -0.0082749086 -0.0110355129 0.0186391895 0.0273517344 0.1081565538 0.0063192214 -0.0167995846 -0.0163709050 0.1046157331 0.0451659641 0.2071611772 -0.1392097486 0.0173286627 -0.0314348397 -0.0590273583 0.0421841234 0.0563581115 -0.2006666004 0.0278894755 -0.0690163085 -0.0521981246 0.0697821091 0.0877805063 0.1172466185 -0.0688206621 -0.0257926535 0.0976601153 -0.0643451113 -0.0805534147 0.1631012057 -0.0358433912 -0.0364998560 0.0873662631 0.0097434989 0.0693409083 0.2244920093 -0.0443432599 -0.0763027895 0.0849366587 0.0372086371 0.1089356138 0.0438435037 -0.0270465014 -0.0048293051 0.0031495681 0.0200335408 0.1296665055 0.0065666621 -0.0233873603 -0.0045597642 -0.0809787310 0.0642120011 0.2448216404 -0.0526231854 0.0581560798 -0.0260235630 -0.0327018174 0.0290098275 -0.0294718099 -0.0966117671 0.1151952583 0.0536264003 -0.0758299971 0.1024166274 -0.1127799410 0.0206271044 -0.0527262473 0.0001004792 0.0280474379 0.0295705812 0.0772611560 0.0814475149 -0.1540469190 0.0249283910 -0.0327214541 -0.0515687815 -0.0944397289 -0.0013252018 -0.0171377009 -0.0114516028 -0.0071826346 -0.0195080441 -0.0149015429 -0.0086839615 -0.0190713235 -0.0192895765 -0.0092787133 -0.0090434156 0.0037687990 -0.0151315762 -0.0146207210 -0.0128045637 0.0067636877 -0.0026058266 0.0320951493 0.0088634556 -0.0091899806 0.0236624400 0.0265643731 -0.0064349933 -0.0126686176 0.0107935490 0.0011860118 0.0088017360 0.0402354868 -0.0065268979 -0.0267914137 0.0096857874 0.0013883452 0.0208768491 -0.0369466961 -0.0323662421 -0.0183582373 -0.0145957503 -0.0040906349 -0.0157393223 -0.0296461853 -0.0118485398 -0.0193999457 -0.0154346566 0.0130746450 -0.0334721632 -0.0036694196 -0.0300727066 0.0202171866 -0.0051265922 0.0573719183 -0.0392047441 0.0028146943 0.0253784925 -0.0172869496 0.0049080575 -0.0458980102 0.0308125099 0.0234328642 0.0024894019 0.0258673126 -0.0136333171 0.0081193341 -0.0342316446 -0.0051719426 -0.0363984876 -0.0007361698 0.0070770119 -0.0205705048 0.0417722734 0.0302257787 0.0237014803 0.0382157423 -0.0339099637 0.0265736944 -0.0742794080 -0.0234341055 -0.0460469004 -0.0169564336 -0.0054162056 -0.0221813565 0.0165068050 0.0011860061 0.0195241530 -0.0077889704 -0.0050164551 0.0310011252 -0.0076569256 -0.0186922121 0.0684429906 -0.0359125285 0.0252124366 -0.0620257179 -0.0215105142 -0.0377402604 0.0712361907 -0.0624346707 -0.0270376209 0.0760122548 -0.0361933439 0.0013961743 -0.0022302744 -0.0173075547 -0.0162709539 0.0061872316 -0.0490043030 -0.0517902327 0.1033330659 -0.0900958372 -0.0479275497 0.1137029504 -0.0390605651 0.0110933668 -0.0279864942 0.0073781934 -0.0174859383 -0.0055060156 -0.0575372585 0.0649499962 -0.1432540429 -0.0019538378 -0.0314247441 0.0043892004 0.0499648093 -0.0213341769 0.0079473099 0.0476137766 0.0033681908 0.0032198283 -0.0011673486 -0.0000549384 0.0331171161 0.0102352364 -0.0212577707 0.0008160961 0.0083618269 -0.0049117413 -0.0299341473 0.0430992599 0.0193336258 -0.0453978071 0.0469617383 0.0069711265 -0.0149971235 0.0653183802 0.0660666967 0.0201776870 -0.0638169320 -0.0475143490 0.0187281226 -0.0654726615 -0.0219489450 0.0049056760 0.0254694440 0.0065808739 0.0388129464 0.0394566772 -0.0240220379 -0.0069656855 0.0275092253 0.0345365095 -0.0181985453 0.1055832349 -0.0143425612 0.0305585891 0.0852824285 0.0579192024 0.1198365894 -0.1897432260 0.2277559794 -0.0517544351 -0.0841141373 -0.0308238725 0.0486892991 -0.0395081674 -0.0462539728 0.0238222591 -0.0905234568 0.0127190127 0.0346487337 -0.2085176780 -0.2025788085 0.0702242683 -0.0403110029 0.0388362491 0.0472119155 0.0350473329 0.0179263349 0.0307520557 0.0315140987 -0.0145643591 0.0674766375 0.0574939540 0.0057368694 -0.0062573761 0.0062592613 -0.0023213667 0.0067511796 0.0055548267 -0.0026451556 0.0241120396 0.0108785209 0.0044632567 0.0344584044 0.0083620143 0.0099165886 0.0279799066 0.0106210901 0.0177024709 0.0030899555 0.0094862411 -0.0073605136 0.0028083472 0.0048766583 -0.0100836567 0.0237510244 0.0191175786 0.0117682862 0.0024805530 -0.0056674786 0.0147268099 0.0324833442 0.0115069361 0.0319935269 -0.0075349072 0.0073996760 -0.0111415858 0.0036681255 -0.0079357210 -0.0157543374 -0.0013165578 -0.0125634418 -0.0182020746 0.0024433713 -0.0121048589 -0.0065754662 0.0027433711 -0.0076628980 -0.0005087727 0.0071913871 -0.0024125429 -0.0174366098 0.0122133315 -0.0053424889 -0.0169381003 -0.0039515703 -0.0107802667 -0.0220213996 0.0109258163 -0.0048546183 0.0007256232 -0.0033886073 -0.0114637749 0.0007305028 0.0104277619 -0.0051978282 -0.0015801512 -0.0249059021 -0.0085782927 0.0355270337 -0.0164417839 -0.0190360384 -0.0295779387 0.0239945179 -0.0015964208 -0.0135435055 0.0074901808 0.0024179954 -0.0119394273 -0.0135902007 -0.0196410622 -0.0182667164 -0.0108627539 -0.0105397346 0.0031040179 -0.0098957157 -0.0035577591 0.0110626703 -0.0038448928 0.0157006613 0.0123167577 -0.0119772401 0.0008029918 0.0287781697 -0.0006185156 0.0367657017 -0.0236005560 -0.0047237471 -0.0141222602 -0.0082369784 -0.0003718930 0.0012781155 -0.0351349867 -0.0024659887 -0.0218008450 -0.0087977202 0.0061105717 0.0047482099 0.0266079724 -0.0113820585 0.0068125502 0.0264167702 -0.0092450707 -0.0066575277 0.0401499578 -0.0003100936 0.0052083371 0.0273751104 0.0110653182 0.0225962912 0.0546329447 -0.0026069939 -0.0014177596 0.0275750455 0.0169622406 0.0300830418 0.0192739406 0.0001013699 0.0016551881 0.0136508618 0.0126036371 0.0287902306 0.0122364955 0.0008583742 -0.0050256291 -0.0005703811 0.0226377495 0.0458137925 0.1386909600 -0.1388094503 0.0396628936 0.1623335972 -0.1736865031 0.0380844657 0.1418157861 -0.2630522156 -0.0861723216 0.2356305853 -0.1426894414 0.1783279321 -0.0450923496 0.1151166787 0.0011879932 -0.0746109601 -0.0361253475 -0.1377777027 -0.1608682877 0.3075685172 -0.0463396240 0.0639573888 0.1243321160 0.1744895901 -0.0014728803 0.0014461197 -0.0004041347 -0.0004399166 0.0003498039 0.0043437532 -0.0001445662 0.0002886898 0.0038542544 -0.0013529317 0.0003909134 0.0015877861 -0.0028107404 0.0012774094 -0.0015309664 -0.0010101719 -0.0011060606 0.0007025507 0.0004842168 -0.0009036848 -0.0029895175 0.0010868480 -0.0012325027 -0.0031675592 -0.0014802287 -0.0019092747 0.0032127286 -0.0000184448 -0.0012465753 -0.0016552776 -0.0017234393 0.0012699042 0.0003672794 -0.0052328807 -0.0006449725 -0.0038632393 -0.0033754079 0.0015469466 -0.0025593048 -0.0058387908 -0.0032704852 0.0011707043 -0.0038630773 0.0060154958 -0.0065319420 0.0073841142 -0.0137323586 0.0207960216 -0.0039733364 0.0113078948 0.0117952146 -0.0016800022 0.0086919375 0.0135772009 0.0088066967 -0.0039517614 0.0148206086 0.0102361252 -0.0015218479 0.0193258978 -0.0138258821 0.0162506299 0.0057160466 -0.0024909132 0.0057525758 0.0116421416 0.0047964591 0.0027004376 0.0152411785 0.0134178732 -0.0056913385 0.0208289313 -0.0266782547 0.0270159220 -0.0036885528 -0.0036463933 0.0083215669 0.0113394652 0.0094951376 -0.0127273237 0.0159895652 0.0021832463 -0.0043434882 -0.0040116768 0.0015799117 0.0080479144 -0.0251113051 -0.0040765836 -0.0310754909 0.0004481236 -0.0061472978 0.0194073088 -0.0202283032 0.0037092902 -0.0336736745 0.0067687145 0.0008460753 -0.0318874800 -0.0150090474 0.0006790860 -0.0037013110 -0.0246009622 0.0029982651 -0.0042004927 -0.0004836071 0.0092076423 -0.0461680371 0.0177264082 -0.0028181777 -0.0453572878 -0.0270757873 -0.0000287781 0.0040265231 -0.0368953407 0.0068635763 0.0057180207 0.0098287566 -0.0149139511 0.0507527629 -0.0279365658 -0.0136898961 0.0177974839 0.0087623346 -0.0049646693 0.0156186649 0.0075324321 -0.0038494896 -0.0048707708 0.0064054624 0.0424305631 0.0136883557 0.0101985693 0.0542046920 0.0300650967 0.0126895234 0.0219442188 0.0246417169 0.0265314427 -0.0605271110 0.0439691227 0.0606576435 0.0254348828 -0.0001888945 0.0334665955 0.0305314791 -0.1492799070 -0.1431605102 -0.1035434933 0.0416654027 0.0259198420 0.0529864005 0.0224608651 -0.0241796833 0.0251306237 -0.0133319061 -0.0381260500 0.2530425214 0.1552680946 0.2173776221 -0.2444864260 0.0172237016 -0.0085799875 0.1903049032 -0.2615272408 -0.1751788848 -0.1637316330 -0.2759633332 -0.2961836642 0.1892828290 -0.1695391744 -0.1469510764 0.2364159179 -0.2113114636 -0.1909401175 -0.1416264930 0.0549607021 0.0075756206 -0.0763212124 0.0099662630 -0.0386762974 -0.1514078641 0.0669906441 0.0386473561 0.0076268605 -0.0162516413 -0.0243017357 0.0039591927 -0.0226209265 -0.0268741304 0.0361466393 -0.0279790903 -0.0700016956 -0.0022391629 0.0038175533 -0.0020800362 -0.0022176796 0.0049464788 -0.0027407595 -0.0005829871 0.0022152733 -0.0004986347 0.0011690783 0.0002859733 0.0007412638 0.0003301664 0.0015667551 0.0002111223 -0.0010256951 0.0035902096 -0.0014475944 -0.0031121911 0.0069346516 -0.0037356833 -0.0009678733 0.0020540154 0.0001171449 0.0012462074 0.0013778564 -0.0001977572 0.0004503254 0.0011787810 0.0003853916 -0.0006519544 0.0039084708 -0.0021369933 -0.0062575383 -0.0061881517 0.0058710053 -0.0007092454 -0.0004490179 -0.0014670411 0.0029198381 0.0003263517 -0.0035219331 0.0032702152 -0.0018915901 -0.0011549798 0.0006175531 -0.0040444510 0.0041355799 -0.0101777718 -0.0079248823 0.0079981602 -0.0006201989 0.0036169430 -0.0050326663 0.0028610427 0.0012421718 -0.0023953796 0.0068537901 -0.0013757222 -0.0032145160 0.0032663480 -0.0041383969 0.0056309188 -0.0003493725 0.0026257966 -0.0007102053 0.0017396916 0.0030671966 -0.0012022609 -0.0002852356 0.0000159366 -0.0014131877 0.0065998234 0.0013124702 -0.0009949811 0.0004727998 0.0002532666 0.0050279061 0.0003893568 -0.0000500754 0.0061846906 -0.0012836667 0.0023637247 -0.0006420834 -0.0031332368 0.0044572847 -0.0027392172 -0.0018726317 0.0024259751 -0.0051567801 -0.0057884155 0.0059619371 -0.0089545606 0.0003954490 0.0019344238 0.0077870355 -0.0008761334 0.0040880810 0.0035415885 0.0002066108 0.0018391564 0.0092347806 -0.0014954002 0.0054868957 0.0034261676 0.0038964553 -0.0011987898 -0.0087820667 0.0036077060 -0.0013752216 -0.0080557167 0.0036406801 -0.0014428110 -0.0086419717 -0.0012517816 -0.0014515587 0.0000622476 0.0049227209 -0.0014410825 -0.0099543151 -0.0038271707 -0.0016339475 0.0037505487 0.0002794583 -0.0014378714 -0.0018049149 -0.0040327067 -0.0011960897 0.0056141287 -0.0011197349 -0.0013258711 0.0011671616 -0.0091342998 -0.0007605608 0.0147385236 -0.0363777273 0.0081870649 0.0585499426 -0.0470686248 0.0571061160 0.1203082144 -0.0421171839 0.0029676587 0.0559920457 -0.0893224104 -0.0374733392 0.0425083738 0.0339686298 -0.0104519363 -0.0691948663 -0.0063189092 -0.0073936051 -0.0592070728 0.0852930024 -0.0131990143 -0.0972368822 -0.0021537431 -0.0261390374 -0.1065183472 -0.0011302344 -0.0010920158 -0.0041657019 -0.0001356852 -0.0021115709 -0.0005107995 0.0001838846 -0.0021578767 -0.0008903666 -0.0000572534 -0.0017876724 0.0012112326 -0.0024706048 -0.0011154962 -0.0039537893 0.0007199112 -0.0021042951 0.0038865586 0.0019744764 -0.0026151466 0.0011179178 0.0023529194 -0.0026936455 -0.0018162758 -0.0003456577 -0.0022800704 0.0030243162 0.0030183135 -0.0027244661 -0.0021452491 -0.0000462346 0.0003295134 0.0023556302 -0.0056618218 -0.0029081954 -0.0051227189 -0.0030211237 0.0003385534 -0.0034264541 -0.0074497082 -0.0028088278 -0.0027097335 -0.0028776089 0.0031454657 -0.0058849640 0.0097442875 -0.0225381866 0.0198143045 -0.0073434304 0.0129663132 0.0023930480 -0.0028845438 0.0074226210 0.0061781421 0.0087631245 -0.0097655446 0.0112816883 0.0119007554 -0.0057149572 0.0153134069 -0.0154457087 0.0138205210 -0.0019343271 -0.0025941007 -0.0002351721 0.0069002546 0.0057334613 -0.0026145793 0.0127370356 0.0156172110 -0.0088728337 0.0175889693 -0.0304512123 0.0264738459 -0.0140026802 -0.0066163012 0.0029038097 0.0046406103 0.0076888351 -0.0084720632 0.0083752294 0.0080627802 -0.0063168873 0.0006214416 0.0036643803 0.0167237220 -0.0266998782 -0.0032300120 -0.0242661316 -0.0031684850 -0.0025037202 0.0020934552 -0.0238902933 -0.0049418087 -0.0218600012 -0.0061677865 0.0011684292 -0.0257475856 -0.0183859619 0.0041070680 -0.0120480180 -0.0244021332 -0.0044645515 -0.0035574692 -0.0115740786 -0.0037863374 -0.0244541168 -0.0036728019 -0.0068391512 -0.0369391751 -0.0348851844 0.0032985884 -0.0081369162 -0.0300202423 -0.0054365055 0.0097449251 -0.0048209508 -0.0061983929 0.0187339261 -0.0280339266 -0.0142399381 0.0124217766 0.0086031060 -0.0095339762 0.0128389156 0.0069410652 -0.0027477147 -0.0038244296 0.0028589651 0.0210862777 0.0519016714 0.0402743851 0.0137452017 0.0585629663 0.0300585114 -0.0239815684 0.0731681687 0.0207864620 0.0621150460 0.0605562076 -0.0500224517 -0.0660114304 -0.0274657973 -0.0819632842 0.0157676595 -0.0736472493 0.0836424160 -0.0060242510 -0.1330731929 -0.0106698677 0.0188263937 0.0363738685 0.0008237395 -0.0369446991 -0.0326107519 -0.0182736435 -0.1589492186 -0.0812400331 -0.1615108686 -0.0720671574 -0.0219923613 -0.1835555117 -0.1272216817 -0.0789245400 0.0794841250 0.0051767283 -0.2335723907 0.2474816320 -0.2105080215 0.0091783523 0.1061556624 0.1879272352 -0.1250186055 0.0618652963 -0.2565256057 -0.0880207083 0.0540948709 -0.0169687131 -0.3581674743 0.0187555597 0.1513575875 -0.2109880796 -0.0511577394 -0.0077796612 -0.0156166699 0.0513796983 -0.1006333787 -0.1224785162 0.0089556221 -0.0499201677 -0.0138194293 -0.1287354138 -0.0014906276 0.0023883339 -0.0025285711 -0.0040180863 0.0043179663 -0.0013303607 -0.0024811172 0.0047765507 0.0031978700 0.0003532127 0.0048664323 0.0040761801 0.0017947882 0.0054582449 0.0024862098 0.0014799499 0.0037741302 -0.0012747997 -0.0068587299 0.0039504556 -0.0024019740 -0.0041768795 0.0039528098 0.0057368783 0.0005471451 0.0010225871 0.0002129831 0.0040709330 0.0068014181 0.0031602830 0.0040365930 0.0030792273 -0.0028367897 -0.0052457356 -0.0042880036 0.0018555909 -0.0018626887 -0.0001930288 -0.0027041828 0.0002103664 0.0023885032 -0.0043352313 0.0009175108 0.0006743154 -0.0026249982 -0.0007439918 -0.0015375097 0.0010890327 -0.0082893541 -0.0049156432 0.0034753765 -0.0005843690 0.0029207832 -0.0047334399 0.0004268448 0.0060146211 -0.0021588557 0.0035796577 0.0009979955 -0.0041821403 0.0002421433 -0.0012437373 0.0012779056 -0.0048388506 -0.0022118649 -0.0013451721 0.0060846106 -0.0001795239 -0.0040852673 -0.0055180531 0.0049799168 0.0000415287 0.0074349176 0.0096138157 -0.0004527185 0.0018991348 -0.0022867494 0.0018644718 0.0012087354 -0.0021622258 0.0034128818 0.0030629502 -0.0003501682 0.0000759396 0.0010445178 0.0021291684 -0.0023153823 0.0047183524 -0.0007640031 -0.0012612681 0.0005559112 0.0035637465 -0.0052489098 0.0000630628 0.0000764806 0.0028782698 -0.0004586516 0.0024243447 -0.0011266596 -0.0014866456 0.0003497262 0.0033053693 -0.0024760029 0.0044501349 -0.0032877230 0.0052156076 -0.0029372090 -0.0029155871 0.0042449903 -0.0027700393 -0.0041845242 0.0066711309 -0.0013820012 -0.0023304672 0.0028540063 0.0004700305 0.0033268096 0.0090985421 -0.0016478340 -0.0030053298 0.0016902675 0.0015595981 0.0065162131 0.0022395656 -0.0012673577 -0.0014266761 0.0000164895 0.0007684332 0.0050767865 0.0007278802 -0.0011297181 -0.0015522492 -0.0037325258 0.0025676601 0.0103507646 0.0066736982 -0.0315961169 0.1046912825 -0.0158564439 0.0346862812 0.1684805769 0.0335413458 -0.0958936868 0.0259116553 -0.0164510340 -0.1108463819 0.1712473029 -0.0093779550 0.0718803152 -0.0308811183 -0.0335774994 -0.0803730316 -0.1723803485 -0.0639719142 0.2499523148 -0.1016189759 0.0522180214 0.0493620380 0.1161486309 -0.0230371149 0.0703451172 -0.0677748062 -0.0113520174 0.0674626774 -0.0403820853 0.0104637725 0.0620619161 -0.0127030093 0.0584520046 0.0100967762 0.0180809676 0.0235372133 0.0536004054 -0.0175173656 -0.0080799275 -0.0433408651 0.0093425248 0.0412893055 -0.0112739901 -0.0314072261 -0.0210256669 -0.0418795944 0.0224716844 -0.0403091517 -0.0510304607 0.0590802031 -0.0475631859 -0.0410457226 0.0471671314 -0.0135400266 -0.0479727156 0.0146689880 0.0427339164 0.0702600805 0.0015715034 -0.0405112068 0.0061023210 0.0207517396 -0.0551323593 0.0255670002 -0.0188277699 -0.0635329843 -0.0131001921 0.0626242509 -0.0577971268 0.0734041146 -0.0530337365 0.0246685995 -0.0822462559 0.0249609388 0.0034262925 -0.0383300838 -0.0051252852 -0.0426294873 0.0778242408 -0.0682342780 -0.0488640772 0.0109893087 -0.0629759197 0.0436592434 -0.0357837269 0.0274770052 -0.0010740353 0.0417361171 -0.0274982766 -0.0223874647 0.0282956576 -0.0722999312 -0.0571307342 -0.0055842362 -0.0753168820 0.0988476218 -0.0833860562 0.0920979779 0.0121991170 0.0551483121 -0.0141683112 -0.0569275981 0.0734067860 -0.0591307496 -0.0518361768 0.0137697755 0.0024841268 -0.0498890683 0.0090891330 0.0029523463 -0.0418050317 -0.0465004785 0.0349931149 0.0001812027 0.0371678008 0.0336158180 -0.0234547607 -0.0288401953 0.0758611198 -0.0298023392 -0.0502333659 0.0162841220 -0.0028006820 -0.0102048216 0.0055963903 -0.0032587967 0.0188600554 0.0686805610 -0.0349434554 -0.0378691586 0.1145923363 -0.0435866426 -0.0620492006 -0.0074460420 0.0093853997 -0.0046004639 -0.0315264022 0.0021168067 0.0438251626 0.0898799154 0.0072462776 0.0823791959 0.0222587303 0.0769594683 -0.0468412788 -0.0619837632 0.0151545088 -0.0344116268 -0.0516264579 -0.0494782060 -0.0622308323 0.0515654943 0.0030151389 0.0014236649 -0.0075291696 0.0032789483 -0.0053680708 -0.0092753965 0.0255067336 -0.0129596449 -0.0067460045 0.0326999340 -0.0111647227 0.0157142303 -0.0585626126 0.0157352792 0.0343260219 0.0335108664 0.0215931066 0.0139322592 -0.0000642949 0.0185241168 -0.0399878280 0.0062320635 -0.0082659876 -0.0080750157 -0.0006038328 -0.0037430555 -0.0165935934 0.0190998644 0.2230935336 0.0246323483 -0.3038409748 0.0276973414 0.0749639179 0.0041256449 -0.1908782889 0.0150315001 0.0587308742 0.0893420599 -0.0247057885 0.0564658130 -0.0459822392 -0.0075433756 -0.0256788084 0.0391187709 0.0755822683 0.0142125666 0.0189267692 -0.0559488817 0.0308708495 0.0392158431 -0.1138551962 -0.0864606469 0.0491132943 -0.0249627681 -0.0040754839 -0.0061222795 -0.0280439829 -0.0055065912 0.0067858871 -0.0125748332 0.0019734434 -0.0072833850 -0.0155061986 -0.0378635228 0.0727060180 -0.0675601032 -0.0409666361 0.0164469883 -0.0118591596 -0.0002776385 -0.0549128333 0.0654776011 0.0215299230 -0.0846815514 0.0889654609 0.0284784127 -0.0395838144 0.0430787346 -0.0184705689 0.0512889129 -0.0470796615 -0.0790481498 0.0177918212 -0.0287927962 -0.0052811648 -0.0690777334 0.0824555405 -0.0170399838 -0.0266121479 0.0324501054 0.0637635639 -0.0420801836 0.0620726174 -0.0306188864 0.0973237481 -0.0819666939 -0.0471097345 -0.0263103721 0.0151254614 0.0067229547 0.0297430257 -0.0553820252 0.0386375661 0.0461354934 -0.0741250432 0.0396384304 0.0130408247 -0.0463441406 -0.0114789424 -0.0476213666 0.0262572618 -0.0852698675 -0.0286521938 0.0344814372 0.0010132565 0.0510239426 -0.0793676917 0.0050129095 0.0161762878 -0.0149361145 0.0732079887 0.0129222946 -0.0657980927 -0.0128575491 -0.0778639178 0.0538981795 -0.1107310033 -0.0051248161 0.0057305065 0.0292301464 0.0346628580 -0.0273945697 -0.0674973239 0.0295222919 0.0131773725 0.0375931805 -0.0385799162 0.0363206528 0.0699180661 0.0252090328 0.0687759994 0.0955055133 0.0135742318 0.0684680617 0.0538834948 0.0217445669 0.0431749519 0.0018303816 0.0194119302 -0.0608842034 0.0526780041 0.0220619424 0.0505377098 -0.0511627719 0.0154764840 -0.1329956039 0.0866781170 0.0106307996 0.0377823432 0.0199054567 0.0158738651 -0.0661697084 0.1005456398 0.0070369893 0.0416561328 -0.0227204128 0.0142775445 -0.1428093166 0.0568091102 -0.0191050513 -0.0626545547 0.0360603912 -0.0233058683 -0.0484177287 0.0358203377 -0.0276886373 -0.0335357271 -0.0067223971 -0.0314848042 0.0437713801 0.0297876620 -0.0257406120 -0.0298721084 -0.0447664545 -0.0289679190 0.1050600865 0.0341284363 -0.0302811488 -0.0325573631 -0.0044452135 -0.0314032098 0.0334273092 0.0442259191 -0.0311344918 -0.0322447256 -0.0316348288 -0.0274028770 0.0807066942 0.0756447608 -0.0893372708 0.0074033582 0.0857245237 -0.1048386631 0.0044665979 0.0813949153 -0.1518048687 -0.0578648943 0.1247966142 -0.0914196801 0.0804589592 -0.0351486709 0.0673802642 -0.0187830412 -0.0977483930 0.0765071327 0.0030064645 -0.0383626630 0.0719783745 -0.0194438423 -0.0086687470 0.1071468838 -0.0457463772 0.0275678398 -0.0197599648 0.0838862123 0.0145501279 -0.0093968677 0.0393594260 -0.0020459950 -0.0053820468 0.0201934002 -0.0228816403 0.0111657666 -0.0245680220 0.0126163539 -0.0099438395 0.0423283860 0.0119740577 0.0311758465 -0.0308250159 -0.0154978145 0.0227388221 0.0002297668 -0.0022320337 0.0346281301 0.0120323715 0.0225410617 0.0339999382 -0.0346898226 -0.0013200153 0.0344606751 0.0128906634 0.0199782271 0.0131831365 -0.0260005450 0.0209445664 -0.0015830597 0.0327214576 0.0434374189 -0.0059738173 0.0012274604 0.0794708171 0.0068848990 0.0152924902 0.0423478641 -0.0091122521 0.0002616568 -0.0796116838 0.0564852158 -0.0438874966 0.0472378925 -0.0897810851 0.0101957784 0.0140644995 -0.0445334820 -0.0207835697 -0.0612153257 0.0825136114 -0.0783136938 -0.0628088598 0.0224359506 -0.0781864233 0.0664060554 -0.0592845112 0.0178156065 -0.0033361075 0.0312575590 -0.0448288848 -0.0311227982 0.0303816163 -0.0779656458 -0.0722176228 0.0189470450 -0.0875535802 0.1445330546 -0.1255578057 0.0909917083 0.0120365510 0.0322590950 -0.0321726871 -0.0820494020 0.0706787072 -0.0545441365 -0.0808521572 0.0067568734 0.0128276060 -0.0781971499 0.0093366508 -0.0036747379 -0.0881220351 -0.0556725876 0.0499691674 0.0058939708 0.0329487505 0.0503471793 -0.0611163094 -0.0294791246 0.1112516079 -0.0705229787 -0.0538285169 0.0116430695 -0.0181425047 -0.0107733285 -0.0004653322 -0.0112602508 0.0183348441 0.1060321110 -0.0828983115 -0.0362667987 0.1667608325 -0.0863929421 -0.0773294030 -0.0271783508 0.0043819602 -0.0081858908 -0.0556658894 0.0078525016 0.0449162243 0.1440253694 0.0404137077 0.0738720725 0.0395408248 0.0967415616 -0.0730456389 -0.0640088675 0.0514012572 -0.0547083075 -0.0568821415 0.0308717423 0.0361848933 -0.0293926018 0.0123882443 0.0186086870 -0.0034868304 0.0098298789 0.0098905453 -0.0058343468 0.0171528434 0.0032642368 0.0005621295 0.0201147028 0.0036921122 0.0260509466 -0.0395823427 -0.0113649666 0.0241333262 0.0386096210 -0.0010732453 -0.0084416705 -0.0247967987 0.0075354682 -0.0249701970 0.0192448789 -0.0057075959 -0.0018278081 0.0089265615 0.0021475250 -0.0145475285 0.0101262830 0.0973054591 0.0292560490 -0.1997663426 -0.0012744195 0.0107892157 0.0015550036 -0.1627492506 0.0203677247 0.0287851135 0.0194521006 -0.0487827138 0.0785430354 -0.0319582573 -0.0177051700 0.0291508375 0.0014503829 0.0108371100 -0.0518593243 0.0162025526 -0.0343560325 0.0060856307 -0.0095006689 -0.0979183346 -0.0891727550 0.0294609172 -0.0143433852 0.0271007154 0.0070560165 -0.0165319158 -0.0090477121 -0.0090250629 -0.0054691889 -0.0011382719 0.0161540630 -0.0315136827 0.0355391213 -0.0521203049 0.0718533289 0.0641480887 -0.0428336912 0.0291989685 0.0227709672 -0.0092089073 -0.0669026715 -0.0237933280 0.0025105503 -0.0899289231 -0.0466894903 -0.0219156367 -0.0503190192 -0.0177355395 -0.0478775375 0.0415717976 0.1184329519 -0.0432920553 0.0523677301 0.0477619643 0.0060988337 -0.1063455657 -0.0058900180 0.0084784094 -0.0175298382 -0.0956462177 -0.0288508892 -0.0726402610 -0.0467342484 -0.0585423108 0.0775847743 0.0310252587 0.0131739951 -0.0066382081 0.0008922356 -0.0213231351 0.0328644724 -0.0150023279 -0.0337037940 0.0429929652 -0.0168320115 -0.0141266394 0.0260412098 0.0129365053 0.0231896440 -0.0154002816 0.0528585360 0.0120840433 -0.0176543624 0.0019187804 -0.0323540340 0.0440742152 0.0093522825 -0.0109181936 0.0089170603 -0.0358824318 -0.0120825692 0.0369236627 0.0175870955 0.0404649669 -0.0290845908 0.1022559735 0.0386663106 0.0120646357 -0.0899046329 -0.0124146088 0.0603834152 0.0567062422 -0.0096206493 -0.0101017168 -0.0064617721 0.0215085084 -0.0204787644 -0.0536654383 0.0121774294 -0.0639960482 -0.0585563436 0.0152483066 -0.0789017745 -0.0533336001 -0.0016659793 -0.0352012220 0.0003143448 -0.0226401155 0.0554198014 -0.0666428143 0.0016210530 -0.0311804609 0.0376934184 -0.0345990055 0.1290156175 -0.0434064549 0.0000304370 -0.0575638103 0.0055543543 -0.0235082443 0.0466858956 -0.0400234722 -0.0001176050 -0.0666697132 0.0513266752 -0.0417624126 0.1151263730 -0.0414974092 0.0268738231 0.0415349728 -0.0284976726 0.0285244747 0.0446202015 -0.0465703469 0.0215863710 0.0354216401 -0.0109616747 0.0124842322 -0.0206248278 -0.0608000818 0.0222026211 0.0378798538 0.0043105694 0.0057054619 -0.0526673071 -0.0110439684 0.0214470603 0.0162603967 0.0128473094 0.0098603856 -0.0398317060 -0.0006944648 0.0205315287 0.0093261957 0.0470293707 -0.0026911395 -0.0917208693 0.0967632026 -0.1045939322 0.0254346528 0.1118018037 -0.1221073631 0.0312690116 0.0988591182 -0.1892988721 -0.0601762145 0.1562206857 -0.1104725096 0.1179668510 -0.0287519428 0.0784894489 -0.0369526740 -0.0806936943 -0.0208402431 -0.1217075978 -0.0862544207 0.2078927712 -0.0793358057 0.0424264350 0.0956710960 0.0557288175 -0.0450047788 -0.0004668660 -0.0991552139 -0.0677501097 -0.0060703017 -0.1195957153 -0.0409729955 -0.0138256790 -0.0634796208 0.0131915049 -0.0127546843 0.0583757368 0.0014840317 -0.0238611993 -0.0109374518 -0.0010114771 -0.0063439755 -0.0505831561 -0.0383535584 -0.0003297819 0.0506434323 0.0208075291 -0.0024078141 -0.0808998341 0.0468939998 0.0052733363 -0.1404328655 0.0448396357 -0.0010871035 -0.1314722166 -0.0031798971 -0.0196487925 -0.0370631795 0.0128002738 -0.0266911599 -0.0082706699 0.0216016324 -0.0332642495 -0.0014074613 0.0565888309 -0.0509025315 0.0542542797 0.0074271679 -0.0242595731 0.0003365439 -0.0177034321 0.0096242872 -0.0048015481 0.0038473084 -0.0054673754 -0.0025149570 0.0011114220 -0.0025788481 -0.0044678320 -0.0092956262 0.0106310797 -0.0078492895 -0.0085014611 0.0054511862 -0.0091824784 0.0104225110 -0.0076421988 0.0014212582 0.0008946848 0.0022307237 -0.0050400117 -0.0032858231 0.0029386118 -0.0069678154 -0.0099165082 0.0076487101 -0.0097809739 0.0210431757 -0.0165946927 0.0098358353 -0.0007668079 0.0041481953 -0.0064794880 -0.0175033818 0.0131575753 -0.0078514854 -0.0185229635 0.0106763789 -0.0023799765 -0.0178484243 0.0085848019 -0.0015049669 -0.0154950567 -0.0055037809 0.0073235123 -0.0013904795 0.0085797090 0.0090799845 -0.0077606268 -0.0057842275 0.0187281860 -0.0101632613 -0.0095952599 0.0037072560 -0.0030926503 -0.0015380691 0.0018001979 -0.0006642030 0.0018859541 0.0181175137 -0.0090827179 -0.0098101457 0.0282169938 -0.0065769740 -0.0185982371 0.0014312965 0.0027036401 -0.0038470885 -0.0069440534 0.0038087939 0.0031862123 0.0241017333 0.0018637168 0.0175211258 0.0068379566 0.0165774431 -0.0133400002 -0.0039376581 0.0119163102 -0.0149261266 -0.0019722748 0.0607209730 0.0500502549 -0.0977161817 -0.0002409695 -0.0014031581 -0.0031333554 0.0023561464 -0.0007403374 -0.0020854945 0.0106508606 -0.0017275003 -0.0039540537 0.0183432398 -0.0035361168 0.0085195839 -0.0409294915 0.0185892278 0.0211497095 0.0215586573 -0.0004617172 0.0075866653 -0.0047684798 0.0050119284 -0.0234397528 0.0046673367 -0.0028793054 -0.0020455405 -0.0047283733 -0.0058136432 -0.0088979971 0.0108012070 0.1530227385 0.0157563236 -0.2049323725 0.0269231891 0.0466140875 0.0012874860 -0.1204404816 0.0081882638 0.0234587261 -0.0093638268 0.0200066350 0.0183434504 0.0200380906 0.0141947373 0.0183089331 0.0005039747 -0.0093833660 -0.0136623810 0.0099004002 -0.0350846869 0.0141863316 0.0004368337 -0.0684890137 -0.0486599536 0.0239544058 -0.0139039819 -0.0049015363 -0.0060664457 -0.0105038819 -0.0127550359 -0.0067913879 -0.0043393787 -0.0037614626 -0.0069888195 -0.0175437856 -0.0445934911 0.0483836926 -0.0870297936 -0.0665678551 0.0227441584 -0.0307429756 -0.0156368042 -0.0058347405 0.0853282333 0.0519008766 -0.0025273766 0.1113742073 0.0690359468 0.0398682685 0.0587053025 0.0289834217 0.0694469962 -0.0583891886 -0.1256222753 0.0145533370 -0.0527835438 -0.0558030764 -0.0226181564 0.1402041361 0.0373896827 -0.0048695258 0.0186943512 0.1217734745 0.0575074138 0.0791776330 0.0668014734 0.0956530531 -0.1182946144 0.0999950595 0.0100808133 -0.0253381250 0.0373861422 -0.0148202036 0.1240716410 -0.0382826685 0.0046699871 0.1570200788 -0.0692302404 0.0552256720 0.1010997027 -0.0264112451 0.0814061367 -0.0477161808 0.1796586434 -0.0210011731 -0.0620878320 0.0892787722 -0.0526263419 0.1924534657 -0.0171669409 -0.0018914570 0.0190840481 -0.1384942257 0.0966680038 0.1373357485 -0.0746640023 0.1269089039 -0.1157238107 -0.0983836877 -0.0403877907 -0.0183333686 0.1456939758 0.0233808262 -0.0820467950 0.1495060100 -0.0877541553 -0.0469311268 -0.1505822461 0.0743583209 -0.1061393369 0.0178525004 -0.0176506391 0.0623000688 0.0268586719 -0.0167358227 0.0866072291 0.0299989186 -0.0135685551 0.0774167078 -0.0253232400 0.0051005830 -0.0136087074 0.0525348022 -0.0182995026 0.1056697170 -0.0442790661 0.0147247490 -0.0562638248 -0.0039610967 -0.0047327215 0.0474011256 -0.0593479300 0.0103816901 -0.0545529764 -0.0133932761 -0.0021293282 0.0528238113 -0.1155333482 0.0245209953 -0.1441802378 -0.0714133795 0.0054304230 0.0920645042 -0.0571374780 0.0021264940 0.0687179854 -0.0440477607 -0.0023486955 0.0374639755 0.0337465716 -0.0131559508 -0.0992359583 -0.0441844064 -0.0015995647 0.0395340827 0.1052030610 -0.0216296615 -0.2194413491 -0.0694758068 0.0016472008 0.0880893575 0.0006248955 -0.0086780775 -0.0429255369 -0.0918732135 0.0033666264 0.1327645999 0.0341912849 -0.0144373167 -0.1003502467 0.0080998425 -0.0177346095 0.0018222933 0.0112199158 -0.0200620880 0.0054043303 0.0062609576 -0.0291887823 -0.0085944564 0.0148930187 -0.0187303231 0.0128717950 -0.0149954747 0.0235620804 -0.0103826816 -0.0425510247 0.0458948139 0.0165704031 -0.0056795141 0.0052659889 -0.0048012070 -0.0129317523 0.0407693424 -0.0401596545 0.0075066374 -0.0107071977 0.0111341140 0.0147901513 -0.0106394958 0.0196524097 0.0078039815 -0.0086859239 0.0074695750 -0.0071374680 -0.0020614515 -0.0121201046 -0.0050540570 -0.0051814192 -0.0067521858 -0.0014374499 0.0047790372 0.0058598418 -0.0028491075 -0.0002812523 0.0002873142 0.0024458763 0.0038947345 0.0060389869 0.0035054447 0.0045643811 0.0059600220 0.0046614412 0.0037560449 0.0043111324 -0.0045453672 0.0116604496 0.0029376780 -0.0087951812 -0.0059102525 -0.0073213558 -0.0045794010 0.0026399230 -0.0046880932 -0.0190034731 0.0016604167 -0.0159191658 -0.0043069805 -0.0023264520 0.0032667148 0.0070664215 0.0007290193 -0.0029725937 -0.0147326382 0.0375252078 -0.0123159041 -0.0047256665 0.0180196258 0.0010420488 0.0059445850 -0.0257555210 0.0218995783 0.0107345213 0.0036584569 0.0207982751 -0.0087340743 0.0052977821 -0.0052663451 0.0002100858 -0.0204116937 0.0135452274 0.0051285680 -0.0117269264 0.0295616604 0.0104215962 0.0139738657 0.0237272550 -0.0191616930 0.0147978683 -0.0263769252 -0.0028474959 -0.0275470904 0.0093232904 0.0097256002 -0.0101973235 0.0050926615 0.0115984491 -0.0030929732 -0.0027529090 0.0122418005 -0.0085111911 0.0059474746 0.0208799405 0.0040147346 -0.0089363849 -0.0064240662 0.0036145711 -0.0127986886 0.0204844779 -0.0065665990 -0.0180628663 0.0200274047 0.0006287382 -0.0010333463 0.0014962087 0.0059375061 -0.0022688789 0.0079908513 -0.0100714258 -0.0186494012 0.0289643168 -0.0116761232 -0.0261990232 0.0307116593 -0.0038160659 0.0105394251 -0.0060041541 0.0103089079 0.0066276610 0.0078965093 -0.0190725046 -0.0241997299 -0.0209977163 0.0084943122 -0.0137903729 -0.0204282649 0.0068908111 0.0434622473 -0.0123365500 0.0003110180 0.0443789800 0.0075977579 0.0047061674 0.0011921681 -0.0168480723 -0.0128233070 -0.0114347564 -0.0003648490 -0.0116139719 -0.0037405487 0.0309734877 -0.0124733039 -0.0125892089 0.0507181991 -0.0101118771 -0.0047466010 -0.1130715637 0.0682774668 0.0369216937 0.0289572636 0.0199197771 0.0497946077 0.0216225623 0.0102418339 -0.0540501886 -0.0043567634 -0.0050403736 -0.0096406175 -0.0288983894 -0.0320406037 -0.0207229806 0.0427881367 0.4730638905 0.0210295511 -0.5820908115 0.0903125800 0.1373172446 0.0114552445 -0.3171585385 -0.0150204693 0.0715979362 0.0395690562 0.0928946216 -0.0298651719 0.0201489906 0.0488358325 -0.0068565864 0.0305488944 0.0703450055 0.0302987281 0.0129079035 -0.0731175572 0.0499989665 0.0241009595 -0.1222610283 -0.0562366896 0.0419570036 -0.0382274645 -0.0518955373 -0.0378926129 -0.0177220582 -0.0415457207 -0.0266061790 -0.0125412404 -0.0135564994 -0.0530102603 -0.0383029963 0.0088993814 -0.0146606843 0.0140671269 0.0065712558 -0.0035964387 0.0051313974 -0.0030376934 0.0117474519 -0.0105598313 -0.0103518646 0.0167890817 -0.0159890951 -0.0084259081 0.0061601971 -0.0074915211 0.0023034729 -0.0127374829 0.0103776044 0.0126752234 -0.0059755064 0.0084456535 -0.0002192872 0.0139751455 -0.0150691629 -0.0049183846 0.0042411141 -0.0050031359 -0.0133204269 0.0073877068 -0.0104138843 0.0037932116 -0.0226093335 0.0190519468 0.0048872466 0.0041300835 -0.0008530392 -0.0002691269 -0.0059361734 -0.0029471206 0.0000813902 -0.0130320671 -0.0017842418 0.0051104655 -0.0109844589 -0.0013192473 0.0106353580 -0.0016688607 0.0005723240 0.0052340372 0.0102733146 -0.0015898143 -0.0039743314 -0.0045588011 -0.0064839205 0.0058247866 -0.0002101920 -0.0011398097 0.0079696381 -0.0145476672 -0.0025983357 0.0165432486 -0.0005849314 0.0026737309 0.0124385541 -0.0008925175 -0.0000198085 -0.0144601691 -0.0078689967 0.0070273666 0.0127395480 0.0171464185 -0.0047585531 0.0140501013 0.0035577899 -0.0004750372 -0.0030641358 -0.0045177248 -0.0131397434 -0.0082510967 -0.0025941531 -0.0168877955 -0.0016700797 -0.0044962309 -0.0122707531 0.0064766797 -0.0057954793 0.0020662688 -0.0025555163 -0.0043247041 -0.0141186511 0.0123053294 -0.0059772879 0.0109037029 -0.0035460331 -0.0042493884 -0.0099279147 0.0070533184 -0.0057645678 0.0064975702 -0.0034108205 -0.0040620901 -0.0095634585 0.0151546157 -0.0059960475 0.0206203351 -0.0024043410 0.0007990456 0.0043279372 -0.0002742516 0.0016163938 0.0047345515 -0.0000389017 0.0057392960 0.0067064308 0.0002267743 0.0099068775 0.0042872898 0.0029326583 0.0051146481 0.0081568783 0.0006728098 0.0114999611 0.0056840667 0.0011499011 0.0058879864 -0.0025809444 0.0033881537 0.0094535515 -0.0024885357 -0.0005022009 0.0060663098 -0.0094189701 0.0058257565 0.0105873050 -0.0081820109 -0.0364753931 -0.0036894319 -0.0063272658 -0.0267167232 -0.0087940697 0.0100298481 -0.0586491114 0.0007256995 0.0091476714 -0.0465917241 0.0024963337 -0.0286091208 -0.0213528139 0.0102891553 0.0157691027 -0.0545743626 0.1906740450 0.1949662944 0.0619024298 -0.1855764981 0.0828499787 -0.0809606825 0.0559093779 -0.1770440399 0.0217486893 -0.0415566143 -0.0259812520 0.0729615524 -0.0365210182 0.0230927229 0.0495887977 -0.0296707306 -0.0133302855 -0.0055316934 -0.0171099925 -0.0340975948 -0.0276608827 -0.0148597086 -0.0560182566 -0.0206140805 0.0056430048 0.0548962674 -0.0095316902 -0.0081472303 0.0407585393 0.0428555631 -0.0042572107 -0.0100364536 0.0285322055 0.0163443745 -0.0034387553 0.0797397862 -0.0040103136 -0.0586763824 -0.0394185319 0.0255205327 0.0486382902 -0.0340344319 -0.0098345305 -0.0216332564 -0.0701873990 0.0265934508 0.0184339971 -0.1229789443 0.1121175761 -0.1534817527 -0.0967745184 -0.0575902217 0.1457818361 -0.0225775422 0.0246253151 -0.0442659714 0.0470615151 -0.0305792259 0.0707926204 0.0097477303 0.0029244136 0.0478911736 -0.0748415745 0.0534943904 -0.0328392335 -0.0566702330 0.0665583787 -0.0075988133 0.0399232345 -0.0347064502 0.0630736464 -0.0462481939 0.0318661659 0.0150552347 -0.0429543656 0.0409472555 0.0039794217 -0.0723793714 0.0683786507 -0.0204377685 0.1166877291 -0.0974460416 0.0969272080 -0.0428683871 0.0453305478 0.0209752413 -0.0328299954 0.0666014627 -0.0666439255 -0.0021826567 0.0523713117 -0.0235457768 -0.0164734190 0.0587962875 0.0074885857 0.0928189470 -0.0625471092 0.0011668144 -0.0633483475 0.0737200582 -0.0479774265 0.1025697155 -0.1039364884 -0.0190657521 0.1160287324 -0.1065484830 0.0232651964 0.0315299930 -0.0296297674 0.0033955519 0.0125554381 -0.0212784053 -0.0429431021 0.1381659783 -0.1375990523 -0.0321074753 0.1282527071 -0.1217820575 0.0331000984 0.0036521301 -0.0055141987 0.0223328962 -0.0176322714 0.0045691584 -0.0623083572 -0.1764400250 0.2017400105 -0.0780216821 0.0275083344 -0.0174144772 0.1150441197 -0.0260457482 -0.0567685220 0.1456175006 0.0498267334 0.0510672126 -0.0345425288 0.0220681863 0.0037724188 0.0139311978 0.0173771862 -0.0110871281 0.0145811786 0.0334433115 -0.0445057849 0.0423800613 -0.0414872771 -0.0263650810 -0.0377136438 0.0564594543 0.0287102130 -0.0251410988 -0.0571550351 -0.0152339647 -0.0270543353 0.0335016118 0.0034503419 0.0234605063 0.0003482295 0.0217011387 -0.0230330140 0.0066035895 0.0151723497 -0.0152685534 0.0351204294 -0.0438612561 -0.0139556612 0.2238853683 0.0156017232 0.0552809426 0.0327977917 0.2203373789 -0.0818895179 -0.0525349791 -0.0338078193 0.0024553936 -0.0831200620 0.0062472485 -0.0202447507 -0.0468185012 -0.0186066647 -0.0385094925 0.1192477982 -0.0177138576 0.0259957552 -0.0084449053 0.0716647276 0.1216548480 0.0952223167 -0.0145538127 0.0149803187 -0.0440444386 -0.0028255679 -0.0430088986 0.0347495435 0.0683894373 -0.0256793325 0.0359170100 -0.0249692915 0.0253628756 0.0357393260 -0.0717077461 0.0148593141 -0.0005043809 -0.0570824630 0.0344462682 -0.0367953608 0.0474058295 0.0210876447 -0.0406178837 0.0972015679 -0.0000848438 0.0018955946 0.0641045216 -0.0011047749 0.0395294794 -0.0339232306 0.0072732154 -0.0107666096 -0.1131830890 0.0476151125 -0.0566886374 0.0587521308 0.0291903805 -0.0279288812 0.0181771041 -0.0035104689 0.0236499302 0.1023176814 -0.0034044730 0.0698337127 -0.0587056185 0.0060321743 0.0298185799 0.0386446272 -0.0309884207 -0.0257012893 -0.0283734498 0.0101450523 -0.0562911315 -0.0519954546 0.0295321526 -0.0253307702 -0.0187980094 0.0140480087 0.0288901470 0.0458473516 -0.0247914115 0.0485713791 0.0673670065 -0.0426964978 -0.0289345269 -0.0449951151 0.0241445911 -0.0311735207 -0.0036916287 0.0076276438 -0.0313044209 -0.0325268466 0.0186369088 0.0417749155 0.0734261326 -0.0447246510 -0.0320230685 -0.0467078599 -0.0024851803 -0.0013730127 -0.0359978747 -0.0084881386 0.0009142069 0.0220642275 -0.0052144503 -0.0251545752 0.0381080263 -0.0131299777 0.0427108048 -0.0272604556 -0.0372426516 0.0217466958 -0.0184679396 -0.0414897036 0.0531346313 -0.0373226980 -0.0232143729 0.0533789478 -0.0497796315 -0.0343816138 0.0546093175 -0.0375037252 -0.0007079004 0.0566158445 -0.0534413437 -0.0244093354 0.0375714090 -0.0406114556 -0.0417587293 0.0406726990 -0.0469833373 -0.0427182788 0.0509438094 -0.0417692129 -0.0396145054 0.0398601338 -0.0425965532 -0.0417972341 0.0014709691 -0.0118639779 0.0599581382 0.0124805748 -0.0092876832 0.0448216253 0.0330130575 0.0138818053 0.0558255440 0.0510507676 0.0339006045 0.0167087702 0.0550904929 0.0098792207 0.0608187710 0.0733625027 0.0412332072 -0.0073832886 0.0146130067 0.0124946424 0.0266237414 0.0442936994 0.0349991836 0.0069927166 -0.0016780654 0.0142141250 0.0062422525 0.0546502095 0.0476879324 -0.0244785450 0.0218020959 -0.0158563576 0.0285464478 -0.0126538769 0.0369305587 0.0358868509 0.0737866527 -0.0287202157 -0.0102847847 0.0047983476 -0.0678664544 0.0718251861 -0.0159571188 0.0523967648 -0.0362548591 -0.0821640347 0.0036645083 -0.0681465719 -0.0165695471 0.1108489553 -0.0690730827 0.0094047858 0.0685743268 -0.0216955611 -0.0082501587 -0.0093247379 0.0042583593 -0.0169307449 -0.0165173564 0.0107682313 -0.0135336193 -0.0174194812 0.0119828810 -0.0129427445 -0.0050224161 0.0055246836 -0.0058626674 -0.0122736325 0.0033171114 0.0066886713 0.0058143809 -0.0093673801 -0.0041065168 -0.0031642300 -0.0109298805 -0.0074664015 0.0070469184 0.0031573081 -0.0053398066 0.0031566775 0.0082674304 -0.0127756105 0.0063174016 0.0187472585 0.0096066744 0.0167337672 -0.0143497914 -0.0049492451 -0.0148693703 -0.0087714691 0.0242290292 -0.0049649768 -0.0167472602 0.0200909054 -0.0455252528 0.0375133811 0.0499830617 0.0113174362 -0.0533437012 0.0013169038 -0.0190312972 0.0070943722 -0.0334537174 0.0695130657 -0.0307893630 -0.0095233446 0.0319397655 -0.0049704072 0.0127172768 -0.0372976304 0.0348544969 0.0181851495 0.0062040857 0.0295290951 -0.0052540774 0.0053949824 -0.0086509131 0.0134136260 -0.0369744499 0.0234939086 0.0139084206 -0.0203244374 0.0447126745 0.0144857357 0.0264805907 0.0324497169 -0.0203679803 0.0189984134 -0.0399387550 0.0109999207 -0.0474581012 0.0188795255 0.0050225038 -0.0089213965 0.0033420403 -0.0084658360 0.0473878826 -0.0262173513 -0.0023792535 0.0229583500 -0.0050468651 0.0508794891 -0.0763016893 0.0298559434 -0.0647792175 0.0937034300 0.0028528392 0.0819597742 -0.1140386296 0.0473245627 0.0821850310 -0.1250392762 0.0500784443 0.0241586932 -0.0387900809 0.0311819199 0.0075407874 -0.0071777501 0.0237970672 0.1155086806 -0.1636809740 0.0659534302 0.1004488688 -0.1478599313 0.0550570330 0.0200094304 -0.0305768333 0.0263459106 -0.0153056227 0.0234535245 0.0162533398 -0.1633140941 0.2368968740 -0.0311102518 -0.0222040130 0.0040002598 0.0592351900 0.0032095291 -0.0047700938 0.0562394219 -0.0124539625 -0.0092915471 0.0158278072 -0.0015886103 -0.0425745131 -0.0051586523 -0.0334468217 -0.0157925120 -0.0154113189 -0.0478486330 0.0077727097 -0.0468199984 0.0160810381 -0.0034096639 0.0281305682 -0.0074380747 -0.0353435852 0.0210096311 0.0268559116 0.0464821826 0.0030186981 -0.0112726654 0.0108516561 -0.0115854212 -0.0295796103 0.0001263924 -0.0050947485 0.0061451582 0.0425725345 0.0148374825 -0.0189846474 -0.0478229454 0.0146826761 -0.0239136071 -0.0324701691 -0.0191374447 -0.0135665362 -0.0676698598 0.0520869150 0.0545721285 0.1312355860 -0.0528872016 0.0966559978 -0.0040089785 -0.0122628973 -0.0666456948 0.0747576489 0.0358931382 -0.0143289412 0.0165486939 -0.0334615394 0.0096209831 0.0080756104 -0.0603331046 -0.0610843844 0.0418076960 0.0049150400 0.0082959651 0.0378716404 -0.0174517742 0.0496259021 0.0748502481 -0.0065734186 0.0057471553 0.0435025927 0.0726422473 -0.0120795028 0.0097174417 -0.0063819605 -0.0078583651 0.0130541679 -0.0110022449 0.0002840087 0.0014100503 -0.0021888179 0.0108804730 -0.0042305772 0.0030898922 0.0013713028 0.0066247085 -0.0001107161 -0.0065655812 0.0174023997 -0.0074445601 -0.0086544916 0.0211942223 -0.0137271871 -0.0017888659 -0.0014711615 0.0032298123 0.0133844220 0.0037695351 -0.0019132396 -0.0021649153 0.0070865886 -0.0021398507 -0.0058051059 0.0233704271 -0.0143910150 -0.0132489524 -0.0062036084 0.0112315974 0.0010234302 0.0063522124 -0.0087820661 0.0140544533 0.0077026844 -0.0156135541 0.0099077583 -0.0035096011 -0.0076724024 -0.0021025367 -0.0141924523 0.0111130108 -0.0225154817 -0.0084872787 0.0160070897 -0.0037573218 0.0125958287 -0.0177374036 0.0099699773 0.0002276161 -0.0036104842 0.0161093660 -0.0058692065 -0.0109421956 0.0007374722 -0.0230012934 0.0212127565 0.0065914712 0.0104606969 -0.0039377320 0.0159592257 0.0145499570 -0.0073143097 -0.0067924602 0.0026559740 0.0031779983 0.0179262607 -0.0125045338 0.0090173773 -0.0160293037 -0.0113690689 0.0135840615 -0.0208581982 -0.0099899766 0.0168534616 -0.0131180334 0.0038344283 -0.0016138575 -0.0158425243 0.0224654291 0.0059475866 -0.0058589083 0.0018279330 -0.0207763743 -0.0128384015 0.0330964564 -0.0059402670 -0.0277159178 0.0088238182 0.0261531789 -0.0184014214 0.0229261511 0.0250967881 -0.0417805586 0.0112783847 0.0307514500 -0.0181901631 0.0327230846 0.0324684029 -0.0018969555 0.0005501062 -0.0227400582 -0.0022906477 0.0011207679 -0.0197374384 -0.0056284991 -0.0008079948 -0.0231288531 -0.0161466820 -0.0013360488 -0.0057111036 -0.0054243407 -0.0003792840 -0.0251013106 -0.0227445408 -0.0018036500 0.0036138341 -0.0073093404 -0.0002443666 -0.0128223234 -0.0181518659 -0.0015804908 0.0018884290 -0.0080636248 -0.0002533656 -0.0088268566 -0.0264975516 -0.0026853119 0.0184252963 0.0255875028 0.0821606140 -0.1054559864 -0.0466093767 0.1138247046 -0.2364756634 0.1560555028 0.1832184516 -0.0700126754 0.0278798650 0.0779956578 -0.0998406385 -0.1019997660 0.0970122785 -0.1065922336 -0.2292394933 -0.1187776005 -0.2871787233 -0.1953131825 0.3641579927 -0.2068089060 0.0285918919 0.1178875218 0.0786631876 0.0185494499 0.0188374154 0.0050732648 0.0353517308 0.0292768486 0.0030602120 0.0285830269 0.0314389546 -0.0101852694 0.0217247361 0.0011596189 -0.0153844736 0.0073007084 0.0241863725 -0.0080017907 -0.0089371928 -0.0242113032 0.0205279854 0.0105531966 -0.0087762871 0.0222863878 0.0106192216 -0.0305743287 -0.0133685679 0.0078145374 -0.0235793550 -0.0214415041 0.0245880093 -0.0293873438 -0.0466036204 -0.0212161390 -0.0238188038 0.0332726846 0.0051865583 0.0327462745 0.0098213371 -0.0521330432 0.0149892637 0.0263694255 -0.0791791186 0.0582323497 -0.0567369506 -0.0752635892 -0.0023915350 0.0663564037 0.0331615208 0.0001413680 0.0121308089 -0.0431667601 -0.0144142485 0.0007060420 -0.0181088842 -0.0126293621 -0.0005776066 0.0515085145 -0.0083048937 0.0014990043 0.0240024693 -0.0440155923 -0.0033693604 -0.0318620546 0.0282608598 -0.0022095061 0.0290513328 0.0108394379 0.0068458068 0.0249151907 -0.0099499101 -0.0257440060 0.0251661350 -0.0710940646 -0.0106969590 -0.0758715756 0.0631002475 -0.0011878339 0.0411065653 0.0199102651 0.0183246548 0.0395258517 -0.0230374959 0.0137928710 0.0284200192 -0.0410182624 0.0072192647 0.0334300379 -0.0476945656 0.0055817982 0.0115678189 -0.0092723068 0.0048113629 0.0031416280 0.0043491766 0.0167848411 0.0100004501 -0.0000247053 0.0108985456 0.0060479771 -0.0050107911 0.0140907384 0.0062977925 -0.0047322248 0.0159541393 0.0017383634 0.0104521665 0.0096217793 0.0087910854 -0.0011063026 0.0156006298 0.0075576936 -0.0055408226 0.0178041436 0.0111050540 -0.0104951368 0.0161943753 -0.0074491465 0.0185356524 0.0040322984 0.0006371077 0.0058660954 0.0164499817 -0.0166187627 0.0342071823 -0.0761766238 -0.0269106406 0.0392405431 -0.0797282244 0.0125267001 -0.0099461433 -0.0350068768 -0.0315507877 -0.0248568990 -0.0291398147 -0.0513449199 0.0189561954 -0.0518124417 -0.1244834910 0.1112594015 -0.1245174441 0.0668825237 0.0566117840 0.0940386850 -0.0405997699 -0.1229452540 0.0371077283 0.1187445010 0.0177560619 0.0053163622 -0.0767603928 -0.0027593357 -0.0165237003 -0.0171382180 -0.0411839013 0.0265412553 0.0194002089 0.0252396135 0.0308018224 -0.1346213892 -0.2880388882 0.0082129152 -0.0421009390 -0.1105747505 -0.2288315093 -0.0980582999 -0.2430468479 0.2283963939 0.0729298010 0.0572732236 -0.1106250344 0.2492327616 -0.0291627644 -0.0079000061 0.0934192947 0.0261126301 0.0117839837 -0.2484407852 0.0371005845 -0.0116411417 0.0019674041 -0.1394602308 -0.1999261040 -0.1863413110 0.0227179564 -0.0049670711 0.1002026182 0.0480706177 0.0363772683 0.0211583810 -0.0148140250 0.0260487015 -0.0300618691 0.0924805874 0.0400710967 0.0204822503 -0.0046528907 0.0215558566 0.0167812427 -0.0003610680 0.0180806139 0.0012901210 0.0113787937 -0.0089815691 -0.0247410450 0.0102933879 -0.0191618073 -0.0166123653 -0.0064622104 -0.0081215707 -0.0016727763 -0.0184488301 0.0188860278 0.0240837098 -0.0045002294 0.0222667042 0.0151462551 0.0140251964 -0.0247708571 -0.0275510645 -0.0010105816 -0.0027708646 -0.0209276788 -0.0089917908 -0.0092239082 -0.0117590413 -0.0289475984 0.0387984087 0.0222533413 -0.0178830512 -0.0198133051 0.0137582474 -0.0091852188 0.0214965398 -0.0118397156 0.0117555058 0.0308962214 -0.0199873629 0.0232163580 0.0160274765 -0.0143751375 0.0140131585 -0.0246529559 0.0399571292 -0.0322481357 -0.0272187078 0.0381866890 -0.0193135177 0.0459787844 -0.0149420546 0.0112864734 0.0042927302 -0.0374642427 0.0395203382 0.0242447988 -0.0376758605 0.0260769096 -0.0486088600 -0.0025305257 -0.0034390107 0.0044132231 -0.0485645475 -0.0130201992 0.0184279272 0.0197197419 -0.0111955137 -0.0089161082 -0.0467077121 0.0282276577 -0.0241845243 0.0274747622 0.0170398767 -0.0335730771 0.0345330484 0.0141601693 -0.0420243784 0.0267135766 -0.0053961763 -0.0104414906 0.0383668140 -0.0351799562 -0.0107680074 0.0170641279 -0.0027529550 0.0176914727 0.0383705422 -0.0532075616 0.0167126760 0.0480720366 -0.0136364051 -0.0546211964 0.0429482143 -0.0355569176 -0.0409980900 0.0679763200 -0.0167434146 -0.0615525368 0.0480430982 -0.0511264190 -0.0432346981 0.0051771685 -0.0188113069 0.0497051318 -0.0026232482 -0.0191883776 0.0372499762 0.0204005551 -0.0066085363 0.0536536493 0.0383557600 0.0077339188 0.0135307323 0.0299819571 -0.0087400933 0.0603531636 0.0590356172 0.0177189786 -0.0048311406 0.0013851373 -0.0045764271 0.0204984968 0.0307441386 0.0097888426 -0.0074443001 -0.0071339774 -0.0036325118 0.0065498246 0.0445250524 0.0217738741 -0.0445422472 0.0040309717 0.0309544680 -0.0935014933 0.0138738868 -0.0237040471 -0.1680754957 0.0039893990 0.0775705147 -0.0473713390 0.0381865261 0.0928963231 -0.1250384785 0.0052443366 -0.0786575522 0.0128568304 0.0782690116 -0.0561002059 0.0189857568 0.0119801814 -0.1208254209 0.0333305898 -0.0250459991 -0.1052487443 0.0126613728 -0.0195271470 -0.0630239043 -0.0407161759 -0.0140328889 -0.0675343648 -0.0286787656 -0.0138104809 -0.0682274384 -0.0090843274 -0.0435112123 -0.0056867010 0.0160785779 -0.0320229522 -0.0501152068 -0.0063751143 -0.0194074515 0.0591791965 0.0117260265 -0.0425982547 0.0245870522 -0.0104524242 0.0101662682 0.0723996051 0.0066404568 -0.0012931785 0.0672191322 0.0468240355 0.0096388930 0.0712136077 0.0226242051 -0.0036823154 0.0559511595 -0.0109063513 -0.0247927593 -0.0569716956 0.0073481840 0.0422451933 -0.0074263648 -0.0025009700 0.1052886654 0.0514543069 -0.0348038619 0.0630817523 -0.0664722468 0.0450080419 -0.0119309353 0.0019158047 -0.0162517976 0.0660121518 -0.0597298976 0.0581550367 0.0202248112 -0.0174132765 0.0291548272 -0.0540423668 0.0465990871 -0.0339934580 -0.0447761422 0.0408717661 -0.0184102852 0.0278430375 -0.0250978617 0.0337586668 -0.0447902204 0.0394488323 -0.0133292112 -0.0349154670 0.0358935250 -0.0160407752 -0.0498380121 0.0375886704 -0.0235970102 0.0832347588 -0.0707206801 0.0669767864 -0.0514756223 0.0519909083 -0.0156404885 -0.0225412573 0.0282298289 -0.0240233425 -0.0024857000 -0.0231129198 0.0144919728 -0.0115508675 -0.0059146900 0.0154997923 0.0131975857 0.0061897408 -0.0106225498 -0.0073572844 -0.0066967513 -0.0214701635 0.0097560711 -0.0036995799 -0.0231418726 0.0180313154 0.0018772331 -0.0099867156 -0.0022850144 0.0033631997 -0.0108322135 0.0028389292 -0.0174607530 -0.0234803275 0.0159555971 -0.0021457798 -0.0373246054 0.0356002436 -0.0139427078 0.0014904009 -0.0088062319 0.0035774738 0.0030982501 0.0053290802 -0.0273632039 -0.0268857657 -0.0153034350 -0.0080899703 -0.0210907277 0.0280157183 -0.0167575433 0.0350367770 0.0222426848 -0.0415087488 0.0477512843 0.0152979973 0.0709580937 0.0549903033 -0.0317675014 0.0159059479 -0.0346563042 -0.0252033344 0.0217158439 -0.0392964852 -0.0607855702 0.0706597216 -0.0711424399 0.0350084051 0.0382943553 0.0526848019 -0.0253077203 -0.0782187910 0.0131072097 0.0656886191 0.0115315905 0.0080399331 -0.0463127629 -0.0022470876 -0.0032123078 0.0026617720 -0.0377937195 0.0224358867 0.0119474147 0.0047121972 0.0093606478 -0.0880251932 -0.1961299361 -0.0025941398 -0.0115167451 -0.0708176358 -0.1610105395 -0.0643029023 -0.1428888686 0.1335750156 0.0358036855 0.0216848428 -0.0501084172 0.1297671782 -0.0032517316 0.0042288884 0.0685986491 0.0108372749 0.0027300185 -0.1523206067 0.0203309368 0.0087702493 -0.0035398145 -0.0860496017 -0.1027650344 -0.1000970664 0.0026314249 -0.0019065033 0.0672459483 0.0206798597 0.0118549720 -0.0072409569 -0.0235395175 0.0179275750 -0.0227601889 0.0515946523 -0.0006024079 -0.0061583609 -0.0668043208 -0.0463613240 -0.0405602392 -0.0610510724 -0.0165166126 -0.0443040021 0.0224824044 0.0353720751 0.0050804999 0.0836971853 0.0323260138 0.0443171010 0.0699535464 0.0111593160 0.0557910911 -0.0199033678 -0.0376096075 -0.0743629213 -0.1104005445 -0.0150968217 -0.0947987489 0.0230260820 0.0828606333 0.0246117207 0.0229905358 0.0018308748 0.0863631790 0.1078588416 0.0185587731 0.1204445528 -0.0415913779 -0.0732171835 -0.0274675855 0.0676753549 0.0308241737 -0.0540553229 -0.0114393369 -0.0320081571 -0.0199223528 -0.0853672189 -0.0371728578 0.0272882790 -0.0770641422 -0.0190308700 0.0709856423 0.0151720381 0.0356523083 -0.0525037424 0.1203344201 0.0384323808 -0.1107437125 0.0062713392 -0.0830014927 0.0180717147 -0.0288051466 -0.0032857375 0.0583092795 -0.1263946126 -0.0316642847 0.1487789765 0.0209025113 0.0710612206 -0.0236145086 -0.0433193920 -0.0097676207 0.0919403653 -0.0156745062 -0.0421337115 -0.0205281072 0.0527987250 0.0121326802 0.1059452132 -0.0152057821 0.0401457159 -0.0056201729 -0.0412049242 0.0452382264 -0.0340212926 -0.0296565041 0.0632399106 -0.0053350329 -0.0186836513 0.0169680707 -0.0361676921 0.0150760687 -0.0146515570 0.0037779857 -0.0211784876 -0.0069951956 -0.0458214455 0.0415362770 -0.0692791725 -0.0430326896 -0.0107422932 0.0790108511 -0.0510659382 0.0170818105 0.0321598052 -0.0538913318 -0.0093752595 0.0918082766 -0.0686810397 0.0456522020 0.0210514073 -0.0237738568 0.0467653729 -0.0653597903 0.0109214293 0.0475831073 -0.0498077430 -0.0400585248 0.0269815451 -0.0870659064 -0.0579577626 -0.0031039453 -0.0338683007 -0.0550693210 0.0301771969 -0.1011783755 -0.0867161916 -0.0280602962 -0.0225950483 0.0041445120 0.0205914398 -0.0166030942 -0.0425584885 -0.0071638544 0.0207244266 0.0174478817 0.0191195286 0.0113565828 -0.0628479118 -0.0337223835 0.0838851879 0.0026105011 -0.0504095762 -0.0173363634 0.0439743444 -0.0978084587 0.0045686910 -0.0550823501 -0.0982125289 -0.0363747456 0.0368663178 -0.0192469667 -0.0068335101 0.0489640775 -0.0925081537 0.0610456230 0.1767436398 0.0323912227 0.1545857866 0.0841869830 -0.2563685788 0.1354429022 -0.0269812760 -0.1181416952 -0.0210108704 0.0038687690 -0.0250748162 -0.0267012690 0.0028432279 -0.0057378985 -0.0811717208 0.0079098972 -0.0078411050 -0.0442485313 -0.0027928608 0.0029379250 0.0222783364 -0.0044511310 -0.0131345142 0.0207737498 -0.0311407833 0.0226706278 0.0311644543 -0.0283164428 0.0196549105 0.0174925572 0.0079320646 0.0382726582 -0.0170997834 -0.0056168005 0.0302734304 0.0198640568 0.0144685271 0.0393968163 -0.0405136968 -0.0135032476 -0.0023391893 0.0283757600 -0.0051807309 -0.0129563039 0.0476291791 -0.0093693557 -0.0020936097 0.0367321779 0.0491314851 0.1173339129 -0.0825743584 0.0003400335 -0.0537186828 0.0822588882 0.0469802624 -0.0214369108 0.0431995539 -0.1195499239 0.0091126106 -0.0691323761 -0.0449381298 -0.0215612946 -0.0481213558 0.1107545330 -0.0463489158 0.0159173284 0.0618214330 -0.1084110287 -0.0130675870 -0.0576350797 0.0418143201 -0.0439205844 0.0869170772 -0.0278914100 0.0044924354 0.0582654220 -0.0529110022 -0.0444032361 0.0680181535 -0.1423443500 -0.0185006692 -0.1586535763 0.1223449875 -0.0569294762 0.1092590189 -0.0289374003 0.0213573287 0.0572750753 -0.0427083806 0.0324739404 0.0128877789 -0.0213502741 -0.0077500276 0.0381807955 -0.0534306727 -0.0314654757 -0.0642894107 -0.0199728669 0.0269687577 0.0353195868 -0.0135467092 0.0669367328 -0.0650189662 0.0325613996 0.0704215822 -0.0820404514 0.0122809583 0.0128377609 -0.0123804689 -0.0044888926 0.0182076856 -0.0176183935 0.0434640570 0.0775572874 -0.0978478968 0.0463462702 0.1103367106 -0.1160063639 0.0282364474 -0.0217297542 0.0118753781 -0.0131109121 -0.0201135689 -0.0158442973 0.0676580733 0.0947440945 0.0984919504 -0.0478153950 0.0744478190 -0.0371579822 0.0427494306 -0.1574461062 -0.0168409881 0.0392456620 -0.1700865537 0.0151506435 0.0460169049 0.0174712571 0.0262378182 -0.0464909004 0.0342506072 0.0130520305 -0.0239643349 0.0273110412 0.0332987796 -0.0407396619 0.0281221241 -0.0130962664 -0.0166185818 -0.0229117036 -0.0031327570 0.0516295093 0.0019283592 -0.0277190129 -0.0005810869 -0.0043024458 0.0223184924 0.0052674732 -0.0035462751 -0.0095004843 0.0291166244 -0.0175672313 -0.0099500331 -0.0072466813 0.0012225704 0.0683558139 0.1842687428 0.0193716497 -0.1022536273 0.0526966032 0.1055104424 0.0471924367 0.0080719573 -0.0820792549 -0.0057075558 -0.0004711759 0.0278479557 -0.0577461523 0.0157429303 0.0006208091 -0.0364423768 0.0018638868 -0.0098579306 0.0797819851 -0.0047305265 -0.0194304918 0.0050737554 0.0501992426 0.0364383401 0.0374351337 0.0143694737 0.0020191857 -0.0413448361 -0.0147463169 0.0135444008 0.0087854478 -0.0031036366 -0.0096664570 0.0106015271 -0.0347092354 0.0040293813 0.0174233822 -0.0593481127 -0.0208306433 -0.0180337701 -0.0454302608 -0.0013396280 -0.0352499812 0.0327702190 0.0181283951 -0.0259813951 0.0883571429 0.0001900878 0.0205918395 0.0510241349 -0.0023980642 0.0512767431 -0.0493143644 -0.0089964358 -0.0439810721 -0.0870766722 0.0007485285 -0.0579997106 0.0266682766 0.0463157890 -0.0110076066 0.0201193870 -0.0043794079 0.0540539944 0.0785231232 0.0044356628 0.1012704404 -0.0921091513 -0.0100089750 -0.0007059521 0.0461819574 0.0076622366 -0.0279185077 -0.0095248712 -0.0074416447 -0.0187631118 -0.0527447829 -0.0052807252 0.0115280705 -0.0344328301 -0.0056771585 0.0416022674 0.0210128470 0.0094816421 -0.0029834212 0.0764200182 0.0059662172 -0.0563571989 -0.0060301577 -0.0278371415 0.0071680998 -0.0184054722 0.0020726061 0.0258985008 -0.0535468175 -0.0117602658 0.0826552016 0.0298602884 0.0223775035 -0.0178940638 -0.0430900659 -0.0040148944 0.0184630420 -0.0314140008 -0.0128493459 0.0017340631 0.0232700889 0.0037147836 0.0440649965 -0.0012140474 0.0136179297 0.0248051907 -0.0022462574 0.0042819633 0.0181645240 0.0012999166 0.0229531822 0.0210554197 -0.0166085743 0.0172594844 0.0072045176 -0.0307229570 -0.0156651617 0.0120110303 -0.0141473557 0.0377910034 -0.0028956936 -0.0333102252 -0.0265128388 0.0217901281 -0.0218323755 0.0079895539 -0.0035282442 -0.0292188300 -0.0265047324 0.0411779130 -0.0258527997 0.0042357193 -0.0201018207 -0.0266550962 -0.0544317763 -0.0227529725 0.0347928180 -0.0173697621 0.0006520972 0.0337041285 -0.0180223952 -0.0341897962 0.0138920324 -0.0402008828 -0.0309525147 -0.0122541183 -0.0290872099 -0.0517649809 0.0166132986 -0.0515845829 -0.0397916216 -0.0303529963 -0.0391966015 -0.0000190162 0.0108584131 0.0033900345 -0.0227171056 -0.0140135740 0.0081127926 0.0141955147 0.0094515000 0.0260969797 -0.0277195112 -0.0340617054 0.0367506320 -0.0087419005 0.0738163594 -0.0194145311 -0.0618710027 0.1157493604 -0.0822246226 0.0694237510 0.1643751909 0.0319422100 -0.0445502995 0.0594283762 -0.0538849642 -0.0535044003 0.0588292063 -0.0571039102 -0.1614796590 -0.1373790176 -0.2241647190 -0.1386418935 0.3103116955 -0.1539570712 0.0600050320 0.0719392218 0.1154560945 -0.0121045720 -0.0138533064 0.0166927659 0.0109147898 -0.0838756348 0.2467680782 0.0124643705 -0.0801186274 0.1322492641 -0.0502629392 -0.0496826034 -0.0996997531 -0.0332304991 -0.0085543174 -0.0614254912 0.0176838793 -0.0182883402 -0.0672322204 0.0259338753 -0.0609605952 -0.1017158821 -0.0286961401 -0.0855382630 0.1352150369 0.0091557558 -0.0141041825 0.0204503203 -0.0245738707 -0.0946988343 0.2507383143 -0.0367344756 0.0388718454 -0.0307184015 0.0442238180 0.0416461251 -0.0188853078 -0.0075408751 0.0169051721 0.0194563498 -0.0208912317 0.0059699578 0.0262686268 0.0126192176 -0.0548519115 0.0805257172 0.0228664663 -0.0128551249 0.0130627917 -0.0196655826 -0.0286035900 -0.0014843836 -0.0100167410 -0.0200816182 -0.0072978742 0.0237832008 -0.0001663481 -0.0094969584 0.0056979556 -0.0292883754 -0.0158759622 -0.0140574743 0.0063755011 -0.0043552297 0.0158563272 0.0062886119 -0.0050101299 0.0071934277 -0.0065658482 -0.0286833904 0.0063265075 -0.0474351960 -0.0210090372 -0.0334088340 0.0210701314 0.0052231711 0.0230219531 0.0127911060 0.0019833767 0.0219102691 -0.0097030017 0.0040845418 0.0119833710 -0.0119037752 -0.0006108258 0.0186154199 -0.0190738543 -0.0082282949 -0.0162020411 -0.0005285875 0.0042675928 0.0161548553 -0.0127999876 0.0182039157 -0.0219726419 0.0191800310 0.0124341161 -0.0280945669 0.0165438619 -0.0001523796 -0.0047774237 0.0032030931 0.0036349941 -0.0059679865 0.0151079929 0.0158523245 -0.0318572239 0.0252939847 0.0215118369 -0.0382096348 0.0239163268 -0.0077620644 0.0022946432 -0.0001800137 -0.0059115951 -0.0056173273 0.0199081455 0.0192709087 0.0416875344 -0.0378486911 0.0240667534 -0.0066594634 0.0131475254 -0.0472832328 -0.0034030901 -0.0053449410 -0.0441049190 0.0778673761 0.0770382092 -0.0157647224 0.0081007197 -0.0160233497 0.0093490528 0.0022576665 -0.0060704083 0.0024285662 -0.0034475076 -0.0010165475 -0.0031199962 0.0007138122 -0.0033478000 0.0007327917 -0.0019020350 0.0068283165 0.0040731829 0.0020013353 -0.0017498045 -0.0054608127 0.0010116633 -0.0003126558 -0.0025556355 -0.0015287928 0.0033774962 -0.0050355743 0.0040046939 0.0003705969 0.0012921055 0.0054868686 0.0242422297 0.0034691701 -0.0249357016 0.0079413267 0.0141070772 0.0046080276 -0.0062704690 -0.0025643872 0.0026703878 -0.0056772071 0.0002697558 0.0048347614 0.0099691941 -0.0015830645 -0.0001258141 -0.0012149450 -0.0163502145 0.0027886411 0.0002623181 -0.0069918732 0.0021761470 0.0003542968 -0.0052966295 -0.0025730374 0.0042651653 -0.0000529869 0.0034793447 0.0006693962 0.0055197260 0.0104926735 -0.0024144688 -0.0029044614 0.0043909864 -0.0000451878 0.0045898343 -0.0416039692 0.0532946924 -0.0228736803 -0.0294341056 0.0656915767 -0.0452194048 0.0099043090 -0.0230091832 -0.0106846898 0.0436902474 -0.0911954182 0.0301643921 0.0011551470 -0.0338810952 0.0082493109 -0.0447242239 0.0656750571 -0.0317379265 -0.0301177634 0.1179655519 -0.0619360673 0.0099211334 -0.0216129857 -0.0115995359 0.0313598584 -0.0226054006 0.0147705759 -0.0110806795 -0.0535176666 0.0091016603 -0.0673396111 0.1089055036 -0.0554998267 0.0568623575 0.0949930705 -0.0406484077 -0.0339967620 -0.0307357549 -0.0067118906 -0.0928514743 -0.1183761781 0.0361227634 -0.0106037246 -0.0496878939 0.0138412451 0.0923093187 0.0879981757 -0.0263030672 0.0752916828 0.1706276103 -0.0563610698 -0.0440574583 -0.0314750706 -0.0114694065 -0.0437981607 -0.0213711076 0.0127376761 0.0027343365 -0.0826658312 0.0094469451 0.1490412452 0.1459040602 -0.0521835626 -0.0043232537 0.0309955768 0.0030866424 0.0364272991 0.0389961069 -0.0092290565 0.0016675703 0.0546341422 -0.0057306553 -0.0041281720 0.0555787296 -0.0092132782 -0.0142135962 -0.1008069791 0.0285451632 -0.0694586846 -0.0864335797 -0.0274406106 0.0181031292 -0.0181461801 -0.0686218894 0.0059666746 0.0816585095 -0.0397757010 0.0754083390 -0.0337757934 -0.1636131367 0.0187207012 0.1339519807 -0.1025930210 -0.0740718293 0.0063742173 0.0520979699 0.0108180348 0.0834236563 0.0834838230 -0.1479315587 0.0221203868 0.0961038932 0.0374693700 0.1358865359 0.1674880322 0.0413958949 -0.1093146393 -0.0304752624 -0.0103469598 -0.1082761869 0.0262985384 0.0843624636 -0.0164160311 0.0523458806 0.0244118702 0.0906698096 0.0904388626 0.1682619630 -0.0271214290 0.0984620355 0.0170421596 0.1491396782 0.1780688060 -0.0190273893 -0.0074599696 -0.0699645491 0.0251218156 0.0911643797 -0.0308452060 -0.0871933396 -0.0009942903 -0.1700861747 0.0249986456 0.1501956567 -0.0882519927 -0.0095781413 0.0172273449 -0.0011829258 -0.0263727986 0.0361100358 -0.0102256581 0.0114326097 0.0421302541 0.0130950990 -0.0279369620 0.0065155864 -0.0134821096 -0.0035237184 -0.0008151287 -0.0029820727 -0.0101332104 -0.0653380774 -0.0640818002 -0.0438617234 0.0792870802 -0.0265182495 0.0336201976 -0.0037600859 0.0685306438 0.0226723805 0.0252074841 0.0268622204 0.0402490706 0.0451718894 -0.0417606871 0.0084553224 0.0506268384 -0.0085995919 0.0395032787 0.0616578196 0.0293530573 0.0515021842 -0.0091048962 0.0076448037 -0.0781953760 -0.0068815088 0.0376546162 -0.0251137209 0.0647167021 0.0500374374 0.0145459015 0.0155400435 -0.0168511179 -0.0257921087 0.0151931491 0.0373616384 0.0034424295 0.0211220232 -0.0725032069 0.0148922817 -0.1919636977 -0.0409712024 -0.0836520776 -0.1450129790 -0.0523506670 -0.0427764722 -0.1541213379 -0.0581892401 0.1538864483 -0.0767571603 -0.0089518454 -0.2601948511 -0.0509931864 0.0232659052 -0.0380206035 -0.0047069847 0.0348821945 -0.0384775707 0.0567088185 -0.0074750070 -0.0107994248 0.0331166076 0.0085518570 0.0223048903 0.0005101809 0.0203500177 0.0257793358 -0.0002533522 0.0266196548 -0.0053680630 0.0262527561 0.0102212583 0.0310680951 -0.0034049255 0.0270643048 0.0265551130 0.0037441255 0.0199516905 0.0278328700 -0.0047403792 0.0270492171 -0.0245746925 0.0423807332 -0.0032088264 0.0454977786 -0.0045968455 0.0375391737 -0.0267932021 -0.0075867029 0.0128625479 -0.0225918005 0.0223036679 -0.0106733815 -0.0389180141 0.0373954512 0.0083253967 0.0260580401 0.0087187681 -0.0083112028 -0.0200024931 0.0158250418 -0.0155594827 0.0355421036 -0.0175448386 -0.0186398243 0.0377752684 -0.0105745361 0.0065909261 0.0114463082 -0.0076447979 0.0068175846 0.0060520390 -0.0097267377 -0.0229461290 0.0525764578 -0.0305467024 -0.0294918262 0.0490246593 -0.0123629112 0.0205530515 0.0068223112 -0.0112107910 0.0239160155 -0.0005912484 -0.0153974896 -0.0340844583 -0.0545451652 0.0414713437 -0.0213627427 0.0169843579 0.0122983609 -0.0139681292 -0.0417922643 0.0351851651 -0.0079551407 0.0643242463 0.1237247097 0.0246959869 0.0018493425 0.0045440654 0.0042352910 -0.0007913413 0.0036086655 0.0035847194 -0.0046155768 0.0025107327 0.0075818873 -0.0051387717 -0.0015245567 -0.0013085232 0.0038280695 -0.0103409055 -0.0073590554 -0.0041762133 0.0092514470 0.0006021758 -0.0016372417 -0.0018036581 0.0030559704 0.0012758177 0.0007457530 0.0042094410 -0.0024881005 0.0049604173 0.0004285841 -0.0180282644 -0.0491413457 -0.0133308403 0.0465866861 -0.0118500344 -0.0179905293 -0.0124596081 0.0278373718 0.0063215785 -0.0000585456 0.0054544484 0.0097955695 -0.0076210237 0.0249557140 0.0056694331 -0.0073893615 0.0099242538 -0.0119730972 -0.0037827543 -0.0027249065 0.0090386697 -0.0045328752 -0.0033465704 0.0100066593 0.0063653600 -0.0085944987 -0.0005821068 -0.0044370567 0.0033903006 -0.0069100268 -0.0042302844 0.0110340751 0.0021652144 -0.0008942632 0.0028796235 0.0016928316 -0.0181370261 0.1152171139 0.0229487492 0.0144242387 0.1215870009 -0.0086803717 0.0547907416 -0.0312615431 -0.0159581242 0.0332400628 -0.1368286674 0.0149052914 -0.0391898285 -0.0546204344 -0.0006912851 -0.0842551491 0.0986371159 0.0052984732 0.0328640985 0.2033993092 -0.0266864846 0.1033989170 -0.0373143313 -0.0559975566 0.0024291485 -0.0413997368 0.0143625830 -0.0856445628 -0.0837312872 -0.0128906912 -0.1684805965 0.1605106169 0.0156318791 0.0359548107 0.1452594177 -0.0053910955 -0.0660082650 -0.0233453587 -0.0076699513 -0.0888718209 -0.1523599124 0.0224619940 0.0159056777 -0.0680454263 0.0025426419 0.1258771547 0.1025053432 0.0018803474 0.0512882218 0.2453566454 -0.0219876087 -0.1176998577 -0.0151846609 -0.0457674441 -0.0199001556 -0.0450457915 0.0121185123 0.0501600482 -0.1101454084 -0.0122998651 0.2334360611 0.1595860223 0.0023975638 -0.0060776708 0.0492594159 0.0094019734 -0.0357692455 0.0437818136 0.0187693807 0.0077151885 0.0600329088 0.0011174880 0.0588718544 0.0324735497 0.0122694494 -0.0132629850 0.0970680607 -0.0179162183 0.0349000872 0.0887184984 -0.0256978183 -0.0567356364 0.0466237641 0.0170265102 -0.0202806456 -0.0357763664 0.0406926873 -0.1133854021 0.0609846431 0.0545562139 -0.0341767144 -0.0843644659 0.0960237842 0.0487683438 0.0212270184 -0.0657726951 0.0205975018 -0.0457793705 -0.0179400654 0.0984736531 0.0103119274 -0.1025217106 0.0405450884 -0.1038757425 -0.0229766218 0.0027711859 0.0665753589 -0.0050532161 0.0446906146 0.0568706879 -0.0124905280 -0.0095807213 0.0242934893 -0.0473462259 -0.0108453914 -0.0245947962 -0.0055121099 -0.0361958012 0.0275395674 -0.0804888979 -0.0360062949 -0.0582570456 -0.0106587847 0.0625955784 0.0177112188 0.0115484945 0.0115949567 -0.0261767470 0.0465325554 0.1038003286 0.0140784909 0.0321544690 0.0018110373 -0.0602091711 0.0983012577 0.0143566092 -0.0009638866 0.0005051155 0.0279008997 -0.0238504981 -0.0070123156 -0.0006921483 -0.0056607946 0.0036997574 0.0313061082 0.0181606907 -0.0005524688 -0.0016600906 0.0038236555 -0.0136478947 -0.0245126770 0.0515185969 0.0374272528 0.0525444026 -0.0575283678 -0.0084046088 -0.0424852895 0.0056046500 -0.0884833686 -0.0094949558 0.0077857707 -0.0092529755 -0.0486510603 0.0196044837 -0.0864508593 -0.0276412014 0.0135240699 -0.0459199572 0.0056660261 -0.0020306024 0.0157070875 0.0032368096 0.0071999407 0.0193338777 0.0115018772 -0.0055702185 -0.0376441150 0.0142013075 -0.0036718303 -0.0321533295 -0.0286646147 -0.0128844370 0.0594375019 -0.0024576573 -0.0052633436 -0.0000908599 -0.0536984218 -0.0148077682 0.1182866374 -0.0015340501 -0.0046126372 -0.0168393465 0.0128861433 0.0229855972 0.0101780778 0.0020949811 0.0031307582 0.0011384023 -0.0175656412 -0.0172257758 0.0141424557 -0.0032234352 0.0097463045 -0.0016359338 -0.0506364655 0.1143357204 -0.0784031400 -0.1256453181 0.1090337297 -0.0970487523 -0.0436369683 0.0372230767 -0.0479233115 0.0248899585 -0.0367416728 0.0164525758 0.0507818062 -0.0444325969 0.0159847366 -0.0114582696 0.0097419324 -0.0291868067 0.0604934680 -0.0663520821 0.0295935559 0.0366728337 -0.0546000397 0.0219538293 0.0538688825 -0.0345899831 0.0215421963 -0.0539100322 0.0449699703 -0.0618957717 0.0754441302 -0.0891278239 0.0349357902 -0.0389428264 0.0795987736 -0.0674577544 -0.0353234634 0.0389202572 -0.0235765339 -0.0293792835 0.0217849547 -0.0123011748 -0.0161351655 0.0002943764 0.0006787707 -0.0086276273 0.0290542733 0.0176101808 0.0043352439 -0.0109985668 0.0257543840 -0.0002666396 -0.0257985575 0.0156452631 -0.0050374939 0.0033049860 0.0095183938 0.0159657089 -0.0082525205 0.0284416335 0.0019939315 -0.0183016969 0.0427904994 0.0210229690 -0.0479231761 0.0287235628 -0.0014324148 0.0075080207 -0.0060116557 0.0291571480 -0.0230709181 0.0350300639 -0.0199386395 0.0587996765 0.0104545854 -0.0410958238 0.0098454272 0.0080855291 -0.0063590494 -0.0040766660 0.0024784688 0.0117228626 0.0102549675 -0.0115944650 -0.0326128944 0.0464085058 -0.0224406797 -0.0053821551 0.0274282984 0.0135392646 0.0529583588 -0.0018410390 0.0279433286 -0.0053872317 0.0262889078 0.0015810387 0.0201099073 -0.0349176195 -0.0273184570 -0.0026486402 -0.0111961997 -0.0050636027 -0.0098599959 0.0046776181 0.0171089660 0.0044307246 0.0108105130 0.0404228625 -0.0575702239 -0.0196256104 0.0062295699 -0.0486727502 -0.1832621996 -0.0319158653 0.1822695913 -0.0408149632 -0.0912488531 -0.0341091703 0.0870538476 0.0210567864 -0.0398447670 -0.0506695404 -0.0159708777 -0.0122115893 -0.0221853834 -0.0087636313 0.0582574279 -0.0299130771 0.0038902248 -0.0226824024 0.0003214115 0.0500955482 -0.0166077030 0.0002205480 0.0331435541 0.0141070269 -0.0287353642 -0.0014934487 -0.0752303737 -0.0240982760 0.0059059685 -0.1086599289 -0.0249325540 0.0356022160 -0.0437979634 -0.0382211230 -0.0525833117 0.0074149000 -0.0213331416 0.0059274455 0.0086629255 -0.0307056020 0.0147297483 -0.0033093157 0.0028616616 0.0040158158 -0.0142645099 0.0414299678 -0.0163387515 0.0035064660 0.0094100448 -0.0002830851 0.0219284631 -0.0348423733 0.0165944972 0.0112809504 -0.0531252169 0.0230915131 -0.0004703261 -0.0111064920 0.0152225321 -0.0047292112 0.0135221214 -0.0114219827 0.0083645619 0.0113083675 0.0012471889 0.0399492092 -0.0601650491 0.0266830577 0.0143374484 0.0142626579 -0.0137905393 -0.0011164701 -0.0052148018 0.0010507443 -0.0177439322 -0.0216285640 0.0124881017 -0.0067875191 -0.0053295259 0.0030640610 0.0135133082 0.0188891502 -0.0143742368 0.0213751746 0.0234889281 -0.0181956794 0.0029074547 -0.0050282036 0.0033109143 -0.0068961271 -0.0053009144 0.0059779501 -0.0099490752 -0.0065058835 0.0049599460 0.0209023276 0.0335517605 -0.0245955022 0.0135396202 -0.0091574245 -0.0059598623 -0.0076651724 -0.0135245407 -0.0005512302 0.0069658369 0.0030793435 0.0005657767 -0.0052585748 0.0117878119 -0.0026547736 -0.0029212253 0.0015388653 0.0078203726 0.0090652549 -0.0039584405 0.0326363775 0.0055323101 0.0003459714 0.0256991146 -0.0085500347 0.0072021633 0.0053938675 0.0139447150 -0.0013357269 0.0368467289 -0.0094381543 0.0103066758 -0.0005818254 0.0001388225 0.0029781754 0.0245839008 -0.0223880651 0.0094875822 -0.0138358645 -0.0016828641 0.0027160802 0.0242786253 -0.0431618698 0.0141250347 -0.0472220258 0.0182177276 -0.0091597578 -0.0317828773 -0.0004877932 -0.0102335704 0.0017806819 0.0116989730 -0.0029062951 -0.0101612845 -0.0121743718 0.0054421471 0.0266894267 0.0165108934 -0.0030297984 -0.0029288736 -0.0331590246 0.0109088894 0.0657989914 0.0091163963 -0.0037488967 -0.0231937791 0.0041670390 0.0035341434 -0.0072774984 0.0111627886 -0.0038806914 -0.0423063763 0.0059836298 0.0068119796 -0.0139189755 0.0666065449 -0.0373501144 -0.0273163204 0.1379885815 -0.1544569790 -0.0588247751 -0.0037475821 -0.1022864211 -0.0564170796 0.1764670332 0.0526363932 0.0100531162 -0.0165357887 0.0127104391 -0.0398815895 -0.0665420930 0.2903244926 0.2396122359 0.2169477843 -0.3308613361 0.0279442158 -0.2016091787 0.0319016009 -0.4097649856 0.0252413219 -0.0330164389 0.0264592585 0.1230935401 -0.0818260303 0.2790514183 0.0771787298 -0.0669639636 0.1500730663 -0.0249266262 -0.0108102480 -0.0542349843 -0.0105249993 -0.0246569712 -0.0450861951 -0.0159839544 0.0229375776 0.0865641077 -0.0321670033 0.0005403086 0.0656538474 0.0780917598 0.0404463199 -0.1499302779 0.0157035744 0.0239446800 -0.0048670979 0.1473046691 0.0442684433 -0.2920554571 0.0036467694 0.0407774719 0.0509606790 -0.0025484628 -0.0354980081 -0.0033746354 0.0108117287 0.0043192053 0.0157001117 0.0304047690 0.0661062374 -0.0568922196 0.0399399910 -0.0312539524 0.0298411002 -0.0230022636 0.0672158381 -0.0482170729 -0.0781236527 0.0526541105 -0.0558955179 -0.0284364542 0.0147082000 -0.0299442881 0.0178157439 -0.0196569758 0.0041992892 0.0288958947 -0.0329920471 0.0026386702 -0.0090511509 0.0053159075 -0.0169996617 0.0376627015 -0.0360714818 0.0152602113 0.0213203679 -0.0338972472 0.0035365901 0.0303325248 -0.0324864601 0.0039367542 -0.0365003708 0.0276967851 -0.0315423652 0.0471077099 -0.0467185892 0.0193914579 -0.0174686780 0.0505554533 -0.0441694558 -0.0180949012 0.0149560509 -0.0126224557 -0.0102412925 -0.0011852302 -0.0073602659 -0.0157762380 -0.0019552555 0.0015807725 0.0011113626 0.0089358935 0.0164061728 -0.0080289760 0.0016792957 0.0186407050 -0.0121574891 -0.0077033552 0.0076170640 -0.0062887602 0.0027984689 0.0057801153 0.0045652602 0.0013273110 0.0214302988 -0.0127323308 -0.0002973905 0.0316341793 -0.0072850255 -0.0147836248 0.0091856886 -0.0042353322 0.0064440837 -0.0051799975 0.0119979403 -0.0049205077 0.0263834757 0.0063847549 0.0145485505 0.0149399493 -0.0265196299 0.0083548797 -0.0018721059 -0.0020320256 -0.0119820536 -0.0028472573 -0.0292789706 -0.0216294060 0.0311455539 -0.0291583133 0.0189033178 -0.0149765994 -0.0035725446 0.0148744119 0.0134065283 0.0608864866 -0.0060086891 0.0149986348 -0.0029642445 0.0276990473 0.0012306342 0.0115786571 -0.0168437930 -0.0194030189 -0.0008651750 -0.0104623773 -0.0009363879 -0.0080119995 0.0077791276 0.0144316676 -0.0007949164 0.0125969159 0.0352444007 -0.0587126887 -0.0241478038 0.0068038491 -0.0214933912 -0.1040419520 -0.0137681563 0.1007938550 -0.0197120920 -0.0657918081 -0.0152556506 0.0433661529 0.0046226894 -0.0335800675 -0.0463111971 -0.0099602421 -0.0132394502 -0.0201628800 -0.0042712202 0.0579783056 -0.0284513482 0.0064931704 -0.0142133087 0.0040113509 0.0383750068 -0.0130933764 0.0078367389 0.0264108248 0.0089221670 -0.0164257021 0.0008565083 -0.0784947748 -0.0283173450 0.0133689027 -0.1045513031 -0.0335647381 0.0327090557 -0.0438507980 -0.0442635927 -0.0508069293 -0.0254112247 0.0465413411 -0.0366846213 -0.0374168655 0.0792732790 -0.0590545122 0.0045275646 -0.0171764348 -0.0034033279 0.0397204750 -0.1032048595 0.0471106063 0.0012048295 -0.0199350607 -0.0014363129 -0.0459812664 0.0767744054 -0.0571526464 -0.0546669424 0.1305045742 -0.0829604399 0.0057161463 -0.0188747072 -0.0023224366 0.0157311330 -0.0327875153 0.0304625934 -0.0007433421 -0.0174992330 -0.0028371824 -0.0740559041 0.1286128515 -0.0856640360 -0.0444378397 -0.0388750907 0.0393696460 -0.0027303813 0.0132342115 -0.0029639163 0.0433409725 0.0576738325 -0.0344553142 0.0119695297 0.0094335436 -0.0058586551 -0.0373389625 -0.0475686116 0.0401173158 -0.0675651353 -0.0645972350 0.0534155091 -0.0138845697 0.0137474929 -0.0101527339 0.0169037393 0.0150179759 -0.0163137910 0.0170043151 0.0045651247 -0.0082591324 -0.0561957066 -0.0863898865 0.0676685789 -0.0449859361 0.0213153749 0.0122932366 0.0309104434 0.0408416302 -0.0058317523 -0.0276760885 -0.0096707397 0.0011209954 0.0141405918 -0.0306116906 0.0091090852 0.0070870771 -0.0441055342 -0.0147436837 -0.0469035695 -0.0224472018 -0.0899911165 -0.0037291859 -0.0172803120 -0.0900266221 0.0308934492 -0.0042504939 -0.0252236022 -0.0085774297 -0.0175987842 -0.1469378649 0.0422518497 0.0058850481 -0.0248112659 -0.0300761253 -0.0150816952 -0.0533546614 0.0583774734 -0.0078858808 0.0587211484 -0.0496537864 -0.0090519530 -0.0419332359 0.1183608566 0.0005399755 0.1703387562 -0.0517457648 0.0180386740 0.0820574480 -0.0051544801 0.0229784733 0.0004416116 -0.0363016261 0.0091954651 0.0363141312 0.0297656834 -0.0067038584 -0.0705825513 -0.0470241910 0.0091360109 0.0238778367 0.0876796166 -0.0181371138 -0.1737752633 -0.0330813851 0.0114790468 0.0623487122 -0.0100711618 -0.0024357023 0.0088678931 -0.0452456745 0.0124369769 0.1100378415 -0.0093644193 -0.0088416550 0.0137901758 0.0504655137 -0.0237680372 -0.0352782283 0.0895743173 -0.1031569187 -0.0806660653 0.0221479987 -0.0558509240 -0.0529409515 0.1311922356 0.0404263982 -0.0054268584 -0.0207664527 0.0001381523 -0.0229307554 -0.0496104244 0.1540304339 0.1321788129 0.1088513897 -0.1888551677 0.0133814971 -0.1229544794 0.0118797951 -0.2296702588 -0.0050638778 0.0061917234 -0.0056278353 -0.0009962936 0.0114005656 -0.0140725003 -0.0048954511 0.0119454607 -0.0088661654 -0.0001284078 0.0061981787 -0.0009508408 -0.0030249446 0.0045315559 -0.0072025743 -0.0009419619 -0.0030132733 -0.0082945130 0.0026441363 0.0020567915 -0.0046252217 -0.0050575776 -0.0072799066 0.0134117472 -0.0009315911 -0.0038448573 -0.0007129548 -0.0111661320 -0.0075197310 0.0253122952 -0.0025308074 -0.0057701574 -0.0081873093 -0.0048453266 -0.0004151366 -0.0091646175 -0.0058943192 -0.0040074222 -0.0058590020 0.0018503023 -0.0127161560 0.0123095566 -0.0090302128 -0.0048262381 -0.0014424057 0.0180636264 -0.0326615315 0.0198878451 0.0710810140 -0.0564626823 0.0590461333 0.0245440119 -0.0165382262 0.0317142622 -0.0160849561 0.0208590191 -0.0083370812 -0.0305310965 0.0317831257 -0.0064232810 0.0074136141 -0.0042823162 0.0206034743 -0.0384676495 0.0404561117 -0.0140444406 -0.0191385936 0.0317795583 -0.0075961540 -0.0354769193 0.0285877362 -0.0115808892 0.0339569706 -0.0261626204 0.0380548081 -0.0495798723 0.0545670986 -0.0189912382 0.0166946410 -0.0339776382 0.0261157529 0.0177882914 -0.0410691633 0.0225272754 0.0212374310 -0.0596216261 0.0494295430 0.0317599472 0.0101754132 -0.0048043867 0.0027000288 -0.0241539681 -0.0111134804 0.0130046436 0.0174953501 -0.0308125010 0.0134834180 0.0340879935 -0.0050179735 0.0003149192 0.0081943499 0.0025696203 -0.0067467934 0.0004598360 -0.0310265638 0.0203472433 0.0217136524 -0.0529037518 0.0036419581 0.0567367658 -0.0023746397 -0.0108423472 0.0104282167 0.0237761887 -0.0164402960 -0.0032801376 -0.0444171700 0.0039619221 -0.0548525562 -0.0034190005 0.0220117536 -0.0030967352 0.0054552900 0.0021227813 0.0045334587 0.0089088176 0.0022510793 -0.0003371222 -0.0043036444 -0.0623011800 -0.0795618101 -0.0000777414 -0.0011141323 -0.0132045270 0.0367457030 0.1999584054 -0.0227667772 -0.0225069101 0.0027462259 0.0825858048 0.0097451781 -0.0004097271 0.0272747519 -0.0199775102 0.0176331693 -0.0252369998 -0.0013106013 -0.0200369441 0.0330441896 0.0302179791 -0.0244030971 0.0446363927 0.0805449000 -0.1733119089 -0.0823927518 0.0207609463 0.0319168869 -0.0067414153 0.0305494625 -0.0427022844 0.0334637238 -0.1002326555 0.0256219946 -0.0480911017 -0.0336825707 -0.0680878894 -0.1254515057 -0.0200717047 -0.0099643828 -0.0469886989 -0.0088450765 0.1710111727 -0.0722321096 0.0125044325 -0.0238412042 0.0273529723 0.0634335850 -0.0216945694 0.0413023807 0.0337378946 -0.0093720892 0.0016797824 0.0117539304 -0.2434088991 -0.0952276073 0.0619658425 -0.2806627652 -0.1194646752 0.0805273872 -0.1239447341 -0.1495125938 -0.1337199754 0.0021440768 -0.0044382356 0.0045210012 0.0049696574 -0.0106184281 0.0079949476 -0.0010773034 0.0027370766 -0.0003875666 -0.0035799843 0.0102182598 -0.0045096621 0.0003664454 0.0006141091 0.0013683006 0.0041092548 -0.0065032014 0.0060992772 0.0079231926 -0.0161059781 0.0110033359 -0.0043717831 0.0094502121 -0.0040533661 -0.0013018194 0.0039173967 -0.0031362672 0.0001517726 -0.0001434235 0.0014824864 0.0053874722 -0.0086846165 0.0072742783 0.0022082098 -0.0018647801 -0.0030183956 0.0015682628 -0.0014130574 0.0006274415 -0.0039529582 -0.0034280246 0.0037427594 -0.0030909083 -0.0005608162 0.0014346477 0.0020079885 0.0043846632 -0.0051200530 0.0033488875 -0.0031122872 -0.0034919808 0.0063062989 0.0009218582 0.0013513355 -0.0022275593 -0.0002110006 0.0013722789 -0.0052559078 -0.0004955306 0.0026599867 0.0026241299 0.0091320825 -0.0093558668 0.0053350588 -0.0023652654 -0.0011103535 -0.0025048815 -0.0043683262 0.0005467747 0.0014017339 -0.0013943077 -0.0000682700 -0.0033924386 0.0045228224 -0.0019750427 -0.0023472836 0.0142040478 0.0036803364 0.0049038402 0.0109810129 0.0047772652 -0.0071997191 0.0072976313 0.0130315914 -0.0106695709 0.0000035607 0.0039898735 -0.0118705915 0.0086482362 0.0217554935 -0.0160957522 -0.0046570177 0.0033596747 0.0070831293 0.0055537543 0.0040346891 -0.0056093832 -0.0012073968 -0.0038584875 0.0147055009 0.0037460350 0.0025412154 -0.0082008227 -0.0082965698 -0.0132819495 0.0077725148 -0.0032898567 -0.0048176248 0.0039769013 -0.0039936962 0.0020040696 0.0095198368 -0.0008609615 -0.0004146098 0.0034599609 0.0016503844 0.0100167931 0.0126675149 -0.0012127487 0.0005463789 -0.0015374084 0.0028781120 0.0193439348 0.0073088762 -0.0018354732 -0.0038417440 0.0062973997 0.0015420076 0.0026733850 0.0077208052 -0.0018119112 -0.0097876288 0.0056273197 0.0036174004 0.0020112522 0.0722834702 -0.0014808823 -0.1352105093 0.0305120162 -0.0521661709 -0.3371111445 0.1918148122 0.0695271017 -0.1249887744 0.1649583329 0.0633926685 -0.0893924829 -0.0700655528 -0.0764540818 0.0187984650 -0.0370910627 -0.2696069663 -0.1760567836 -0.2175887499 0.1573564040 -0.0367229810 0.0440755427 -0.0919064339 0.2566498430 -0.0253852765 0.0114007772 -0.0380835214 0.2003269669 -0.0116977211 0.3370146418 0.0748611480 0.0196640069 0.1800531358 -0.0513906005 0.0783774143 -0.1005463283 -0.0477278934 0.0229418010 -0.1249908743 0.0241850780 0.0141095426 -0.0788471427 0.0422945079 0.0583760012 -0.0559053773 -0.0096303157 0.0214812871 0.0901913640 0.0290041675 0.0072420648 -0.0314813305 -0.0861901864 0.0245681734 0.1655327054 0.0049233357 -0.0445918092 -0.0406550613 -0.0289311621 -0.0346421927 -0.0480821049 -0.0161540516 -0.0488629969 -0.0103149475 0.0563266341 -0.0518247215 0.0542492261 -0.0742762021 -0.0928713161 0.0901299345 -0.0054643753 -0.0116280435 0.0197310684 -0.0367163751 0.0077614588 -0.0078826019 -0.0147519581 0.0010781430 -0.0033193368 0.0206175251 0.0000140654 -0.0023024832 0.0135556753 -0.0198886715 -0.0019134040 -0.0090426976 0.0101868110 0.0028776239 0.0252253565 -0.0020224990 0.0094763024 0.0149889315 -0.0050850343 -0.0115630999 0.0136659464 -0.0344315457 -0.0063478189 -0.0265922417 0.0239590649 0.0052274537 0.0364648633 0.0017957513 0.0188749908 -0.0033183526 0.0009394840 -0.0041558659 -0.0043949685 0.0033623517 -0.0070466227 -0.0083777779 0.0076809397 -0.0046852015 0.0011722214 0.0004080727 -0.0008008424 -0.0016621244 0.0051594746 0.0061955974 0.0051747608 -0.0009607499 0.0039811827 0.0013835389 -0.0018178307 0.0052379711 0.0008496858 -0.0009992957 0.0058761294 0.0024289007 0.0014874880 0.0043114313 0.0044303163 -0.0018103903 0.0064690535 0.0058690540 -0.0044891862 0.0098551299 0.0038245486 -0.0037602638 0.0042549077 0.0007960443 0.0011180023 0.0023297358 -0.0052125631 0.0093275071 0.0052359811 -0.0001607578 0.0137872808 -0.0240822815 -0.0141096763 -0.0088696424 -0.0143179803 -0.0148681232 -0.0534160293 -0.0437563977 0.0052898674 -0.0002975827 0.0015456802 0.0016603478 -0.0016742448 -0.0024908740 -0.0102342962 -0.0002557339 -0.0005998406 -0.0015149293 -0.0054976750 -0.0016631309 -0.0006972364 0.0014074689 0.0021753537 -0.0025958713 0.0030084512 0.0034518497 0.0015237447 -0.0013848934 -0.0020004164 0.0026556334 -0.0034381430 -0.0079234750 0.0134239476 0.0050424694 -0.0037873867 0.0038549524 0.0137146602 0.0016092835 -0.0060487264 0.0010610998 0.0120185154 0.0022445437 -0.0010499069 -0.0028264379 0.0063437243 0.0121883019 0.0063466111 -0.0027170391 0.0030658227 0.0034156573 -0.0151613302 0.0069763517 0.0038202327 0.0050045809 -0.0012723445 -0.0063493779 0.0012206049 0.0005618069 -0.0012801872 0.0004069905 0.0024150882 0.0001798271 0.0175930040 0.0056642880 -0.0071584566 0.0218745135 0.0083592007 -0.0084108752 0.0104499434 0.0091152838 0.0079637533 -0.0074569409 -0.0693156485 -0.0780574367 -0.0385581096 -0.0929803065 -0.0348819270 -0.0569697091 0.0108987294 0.0215390259 -0.0209191133 0.0946298464 0.0078148693 0.0506048173 0.0385800626 -0.0023387881 0.0661565802 -0.0695184447 -0.0552923279 -0.0695813855 -0.1737204568 -0.0234005933 -0.1040097128 -0.0031741492 0.0789595505 -0.0049823520 0.0313445447 0.0052205348 0.1174235036 0.0630502340 0.0213633397 0.1474524019 -0.1153360648 -0.0808024375 -0.0098851638 -0.0871169540 -0.0147043257 0.0375449076 -0.0035075883 0.0091381308 0.0462988991 0.0819431191 -0.0071443790 -0.0200962088 0.0344538058 -0.0009790819 -0.0707756004 -0.0557590204 -0.0213044587 -0.0174847450 -0.1575529287 -0.0049693846 0.0657552473 -0.0250607738 0.0458204267 0.0107302870 0.0279627873 -0.0020523203 -0.0533944210 0.0569543111 0.0151065122 -0.1406649065 -0.0854509681 -0.0295432735 -0.0284473614 -0.0399846802 0.0009794675 0.0427829099 -0.0225359802 -0.0170029606 0.0029400363 -0.0330415853 0.0011768694 -0.0386044112 -0.0101541167 -0.0080235246 -0.0315853329 0.0961394351 0.0583527726 -0.0589623879 0.0955594597 -0.0774167585 -0.1409585657 0.0626784521 0.0118494998 -0.1291016041 0.0115838561 0.0225254233 -0.2216379954 0.0821772028 -0.0106764480 -0.1807195584 -0.0138146950 -0.0123734460 -0.0185069091 0.0569848310 -0.0169428575 -0.0080069660 -0.0122073603 0.1104726413 0.0297362945 0.0455514515 -0.0276324756 0.0762606568 -0.0844708857 0.2106955673 0.0620665037 0.0515828294 -0.0198377028 0.0638120022 0.0562199346 0.0536469119 0.0435476301 0.0410671591 0.0172006142 0.0420675249 -0.0046732641 0.0781354164 0.0151725750 0.0425420615 0.0080481852 -0.0139848735 -0.0397625240 0.1195856048 0.1258098386 0.0131930917 0.0361326565 0.1187959296 -0.0125002869 0.0349095829 0.1767790292 0.0094647323 0.0246698936 0.1467056457 -0.0368457986 0.0077964457 -0.0102264646 0.0023311515 0.0094020206 -0.0092456122 0.0089501980 0.0240920400 -0.0173880236 0.0029624406 0.0138109474 -0.0216199694 -0.0037785022 0.0009552546 0.0022187623 0.0060669471 0.0030655065 0.0018826753 0.0010831158 -0.0014916372 -0.0086414778 0.0135730505 0.0049323498 0.0088728118 0.0074785107 0.0123301350 -0.0540795795 0.0490108851 -0.0455843671 0.0574304854 0.0754512491 0.0319892535 -0.0068646273 0.0896321603 0.0008902367 -0.0356490066 0.0175044094 -0.0753836319 -0.0399659954 0.0275693092 -0.1009908315 -0.0385012835 -0.0180141068 0.0177036606 -0.0541973346 -0.0362108031 0.0466003930 0.0960020297 -0.1213486859 -0.1754679013 -0.0083145583 -0.0292570552 -0.0064239385 0.2312287758 -0.1270583632 -0.2863746659 -0.0246665090 0.0250847130 -0.0688637031 0.0524835465 0.0684697462 -0.0635772272 0.0122264420 0.0039067546 -0.0354917310 0.0792763653 -0.0392476603 0.0857713233 0.0329345707 -0.0573700820 0.0159659113 -0.0078856811 0.0017171052 0.0003700590 -0.0231738563 0.0157664308 -0.0150416782 -0.0082633295 0.0052524086 -0.0078518775 0.0048699945 -0.0028227201 0.0002037523 0.0099391017 -0.0101067531 0.0014937804 -0.0017539609 0.0024595921 -0.0032954316 0.0129364756 -0.0093146185 0.0054337573 0.0069778800 -0.0078931997 0.0001692199 0.0121638139 -0.0124045021 0.0026966768 -0.0088873884 0.0082411626 -0.0061811644 0.0186997322 -0.0134386505 0.0088104899 -0.0089079902 0.0138053393 -0.0107708054 -0.0090373706 0.0087506100 -0.0055013180 -0.0089323366 0.0079715826 -0.0051160331 -0.0055218141 0.0022298631 -0.0004168907 -0.0035519617 0.0069000004 0.0037477211 -0.0001776518 -0.0016116838 0.0056548136 0.0002989585 -0.0060793240 0.0035771274 -0.0030706606 0.0022522072 0.0018656425 0.0044720059 -0.0051934480 0.0072908932 -0.0010554860 -0.0025271507 0.0087135484 0.0114817051 -0.0168472164 0.0099361578 -0.0006845258 0.0012273212 -0.0017777370 0.0099504634 -0.0122475595 0.0094533247 -0.0057133115 0.0133844902 0.0021730696 -0.0051190759 0.0029056119 -0.0024283611 0.0136689514 -0.0196834705 -0.0004209286 0.0073851773 0.0342064722 0.0912677000 -0.0027477220 0.0064154330 -0.0079630525 0.0011848383 0.0011339255 -0.0052886627 0.0035494757 -0.0015943843 -0.0038868145 -0.0022834645 -0.0016781664 -0.0000135793 0.0016971659 -0.0023366932 -0.0004913500 -0.0013252382 0.0032508992 0.0002018556 -0.0002676918 0.0006522035 0.0004507191 0.0051064386 -0.0045114412 -0.0035340066 0.0072612478 0.0002180693 -0.0053039859 -0.0001594231 -0.0067666509 -0.0003308548 0.0070976301 -0.0026153815 -0.0010361069 0.0005016039 0.0035400994 -0.0012445401 0.0030555740 0.0087021636 0.0003382357 0.0015879329 0.0017186099 -0.0002860824 -0.0054514843 0.0043836758 0.0011654931 0.0037129033 0.0001889183 -0.0017158563 -0.0011570161 0.0034714537 0.0025869765 0.0000629024 0.0025641085 0.0015632464 0.0106083903 0.0007625508 -0.0084089837 0.0074282096 0.0014171393 -0.0052968715 0.0050912943 0.0032318396 -0.0027627361 -0.0019029948 -0.0191985254 0.0198999171 0.0211036405 -0.0571189820 0.0396169085 -0.0081120084 0.0136346750 -0.0019111052 -0.0248325850 0.0736419057 -0.0348678146 0.0056255143 -0.0040335213 0.0146088601 0.0280822321 -0.0496637174 0.0429304678 0.0468148893 -0.0994831729 0.0642047280 -0.0094784257 0.0092673230 0.0037298908 -0.0048205873 0.0259317381 -0.0263277078 0.0112630366 -0.0298157902 0.0258637248 0.0530030101 -0.0828144086 0.0559803232 -0.0298262382 0.0495226268 0.0657342511 -0.0390326204 0.0158682599 -0.0199153076 -0.0101174156 -0.0242871728 -0.0350481351 0.0348420090 -0.0379952693 0.0038317540 0.0461961808 0.0115866259 0.0816456476 -0.0617558318 0.1031881632 0.0778329018 -0.0795205741 0.0401852868 -0.0660315875 -0.0097394524 -0.0054839605 -0.0249116500 0.0825360873 -0.0872230863 -0.0180004168 0.1010793533 0.0038720062 0.1184083114 0.0411991168 -0.0102354586 -0.0131884179 -0.0165358961 -0.0267558642 0.0000804118 -0.0567986768 0.0420203715 -0.0073978264 0.0429122548 -0.0153663532 0.0110447116 -0.0083311775 0.1064905592 0.0357289993 0.0307758304 0.0845961778 -0.0198697186 -0.0504433434 0.0561258062 0.0953261810 -0.0890835660 0.0041819752 0.0031450988 -0.0797948012 0.0649812109 0.1636186306 -0.1475145822 -0.0330299617 -0.0243626943 0.0767164820 0.0477698414 0.0244477352 -0.0123779197 -0.0101656086 -0.0170231571 0.1465197846 0.0338317246 0.0474386095 -0.0045167414 -0.0776801637 -0.0494254919 -0.0339548809 -0.1451304475 0.1087080232 -0.0217144423 -0.1570156009 -0.0308086338 0.0617676481 -0.0689920212 0.1016427598 0.1000866571 0.0507606227 -0.0562754431 0.1618317178 -0.0809105993 0.1448476575 0.2263797041 0.1225473966 -0.1556616268 -0.1310345552 -0.0379121968 0.0166605169 -0.0489289910 0.0712749288 0.0013115693 -0.2679818542 -0.0260768292 0.0146003913 -0.0950190555 0.1563961952 0.0044211357 -0.0141783301 -0.0065823202 0.0065697696 -0.0083672246 -0.0019149536 0.0305537485 -0.0281622557 -0.0183325656 0.0020537640 -0.0219463252 -0.0143711743 0.0053262383 0.0031740367 0.0060064049 0.0156674961 0.0243187135 0.0046449320 0.0102269445 -0.0259534940 0.0094619380 0.0298409783 0.0170067799 0.0080068039 0.0365106001 -0.0210153772 -0.0148571758 -0.0324134091 -0.2035861102 -0.0636444732 -0.1492670900 -0.1173607720 -0.0833748447 -0.1159888792 0.0191779177 -0.0321428366 -0.0145961636 0.0086080968 -0.0153946335 -0.0601991010 0.0309332695 0.0095030198 -0.1253840970 0.0336494643 0.0145689116 -0.0853514063 0.0833512450 0.0635851807 -0.0606610388 0.0798878361 0.0255632478 -0.0577811956 0.0342141574 0.0701960736 -0.0704408790 -0.0511081163 0.0625402274 -0.0958666264 0.0452447427 0.0225859351 -0.1019288877 -0.0293079791 -0.0167130738 -0.0380211480 -0.0015093400 -0.0492597923 0.0323150972 -0.1429894419 -0.0812754108 0.1396958004 -0.0110759176 -0.0169082100 0.0301323770 -0.0397987823 -0.0020614771 -0.0011771226 -0.0177289028 -0.0032363032 -0.0003697048 0.0227922239 0.0058380290 -0.0089995957 0.0151656349 -0.0258327767 -0.0049215446 -0.0135128074 0.0128509028 0.0061767227 0.0291896848 0.0030569723 0.0097618486 0.0153346913 -0.0001586997 -0.0213541991 0.0175554238 -0.0516987887 -0.0109221823 -0.0331227331 0.0279827174 0.0136458261 0.0512151437 0.0069687078 0.0274217709 -0.0052789436 -0.0049554699 -0.0036614683 -0.0050188597 -0.0018959811 -0.0058686305 -0.0123486595 0.0047567439 0.0019660196 0.0075083637 0.0036540428 -0.0023753930 -0.0000085783 0.0011395713 0.0065810530 0.0082732011 0.0046053629 -0.0013598351 0.0039645789 0.0061927921 0.0053489088 0.0008040801 0.0016141900 0.0080198335 0.0022631711 0.0032542584 -0.0006930554 0.0084788129 0.0044357308 -0.0016097704 0.0088063114 0.0068686757 0.0128761419 0.0012421570 0.0001851829 0.0098768236 -0.0016107264 0.0014307034 -0.0061174872 -0.0031256299 -0.0016116200 0.0073965787 0.0036865761 0.0193259618 -0.0325579588 -0.0389950952 0.0014830247 -0.0171574787 0.0052133626 -0.0114160736 0.0596761434 0.0003059260 -0.0072752315 -0.0004625388 0.0033905939 -0.0040266077 -0.0024781690 0.0083673368 -0.0020847845 -0.0076869543 -0.0009717587 0.0009360902 0.0000192529 0.0010950309 0.0007481369 0.0004753442 -0.0008636143 0.0011799561 0.0018026340 -0.0001860818 0.0017685420 0.0007822347 0.0032882673 -0.0022391311 -0.0051432004 0.0051921328 -0.0015526896 -0.0058564648 0.0050236046 0.0030931828 0.0039087030 -0.0017530895 0.0006966993 -0.0002326588 0.0040282920 -0.0034329429 -0.0035717067 -0.0009226312 0.0036053117 -0.0012541868 0.0002218920 -0.0059765002 -0.0005449273 -0.0002396120 0.0010072292 0.0061846637 0.0047307781 0.0012858164 -0.0020497285 -0.0009571122 0.0053473144 0.0025992882 -0.0002701148 0.0041815829 0.0021534449 0.0055923067 -0.0015022635 -0.0067320967 0.0066159883 -0.0008980906 -0.0065591461 0.0047686439 -0.0009779950 -0.0036541691 -0.0002900165 0.0382930590 0.0853084930 0.0431009097 0.0286651701 0.0664824636 0.0364329221 0.0009189864 -0.0189642681 -0.0027326019 -0.0121330156 -0.0380587497 -0.0374437412 -0.0330693693 0.0152650075 -0.0288983024 0.0141536024 0.0881383772 0.0912672804 0.0624133568 0.0774594208 0.0747739680 0.0060068749 -0.0589706349 0.0058865961 -0.0020110470 -0.0322628911 -0.0924713073 -0.0756137788 0.0030892012 -0.0724536415 0.0208024501 0.1213613351 -0.0528315497 -0.0454726222 0.0667778411 -0.0014399726 0.0202895586 -0.0159135306 0.0466189673 0.0737753199 -0.0548026178 0.0162748653 -0.0167035874 0.0121232295 -0.0212569299 -0.0503116345 0.0801165590 -0.1135841840 -0.0677938583 0.0999795726 -0.0177629654 0.0245588466 -0.0290851913 0.0017380462 0.0295903037 -0.0350153269 0.0280349111 -0.0678084547 0.0101751170 -0.0369878880 -0.0934927022 0.1141189459 0.0686224118 0.0247684961 -0.0168347081 -0.0435080225 -0.0048027027 0.0089274085 -0.0706381761 0.0147893407 -0.0077054008 0.0081070123 -0.0326004054 0.0051347535 -0.0397137912 -0.1361340333 -0.0095930077 -0.0284142737 -0.1255392190 0.0787549586 0.0833790253 -0.0628310654 0.0302810580 0.0300244071 0.0609715221 -0.0055122322 0.2086626248 -0.0928604748 0.0298246199 0.0815755235 0.1219612972 -0.0247958220 -0.0741255275 -0.0280686674 0.1099943433 -0.0793554077 0.0806025593 -0.0325095908 -0.1586187262 -0.0086737686 0.1717124090 -0.1555578768 0.1667572508 -0.1070287021 -0.0082336712 0.0824484747 0.0204735047 0.0641369699 0.0870406781 0.0479889940 -0.0489891845 0.0780275474 0.0780075048 0.0573378808 0.0008576662 -0.0316121125 -0.1120448555 0.0847204433 0.1187151039 0.0564699141 -0.0633884742 -0.1123365664 0.0676850752 0.0387534284 0.1443944007 0.1206881132 -0.0078675814 0.0147315727 0.0699379133 0.0389021293 0.2346096541 0.1662056926 -0.0547178072 -0.0240455162 -0.0129738013 -0.0000127496 0.0025888764 -0.0161301252 0.0096702358 0.0124373249 -0.0133343961 0.0041598356 0.0070410324 -0.0252204157 -0.0081838355 -0.0045815235 -0.0036366537 0.0051444853 0.0174866448 0.0074519574 -0.0221963889 -0.0111090098 -0.0471824505 0.0399690915 0.0211625825 0.0254518104 0.0092410939 0.0640788929 -0.0033505050 0.0011041663 -0.0019860245 -0.0012058179 0.0002114058 0.0043369153 -0.0028757653 0.0005849110 0.0017439433 -0.0010921675 0.0008607807 -0.0065088260 0.0008408849 0.0005912912 -0.0048962700 0.0035308986 -0.0005715545 -0.0140888836 0.0022561410 0.0004213911 -0.0080980417 0.0092636297 -0.0024459474 -0.0121716934 0.0053204614 0.0001635522 -0.0068769763 0.0105007317 -0.0023936449 -0.0141676308 -0.0007236542 -0.0024506290 -0.0100768569 0.0097116304 0.0067095873 -0.0025678490 0.0034799776 -0.0035663959 -0.0001793752 -0.0021302978 -0.0102176086 0.0041038352 -0.0090427999 -0.0008992660 0.0074293516 0.0445675407 -0.0388538461 0.0234742130 0.0829000564 -0.0701035686 0.0575868603 0.0304923753 -0.0251279437 0.0267425510 -0.0055907691 0.0093914947 -0.0019192818 -0.0376499259 0.0341971871 -0.0159794984 0.0075473259 -0.0055534220 0.0128111818 -0.0443602966 0.0419265456 -0.0225262623 -0.0189719158 0.0226327947 -0.0090216683 -0.0496940616 0.0413590331 -0.0240453945 0.0306552929 -0.0246308224 0.0291256266 -0.0661475825 0.0593785748 -0.0344071927 0.0418669331 -0.0530647753 0.0444418099 0.0384151047 -0.0355493748 0.0223944063 0.0378587703 -0.0213816170 -0.0002611179 0.0020204657 -0.0147419945 0.0056189699 0.0172830610 -0.0256727414 -0.0125209950 -0.0198226352 0.0085445837 -0.0098694244 -0.0154615534 0.0149954103 -0.0175994233 -0.0034359453 0.0064869805 -0.0187982096 -0.0106935493 0.0072197515 -0.0109856363 -0.0274159887 0.0210339267 -0.0161730052 -0.0286572061 0.0210764089 -0.0292822020 -0.0075633643 0.0122131564 -0.0202120927 -0.0140864262 0.0219811744 -0.0062186954 0.0411734017 -0.0543308177 -0.0058453585 0.0160540917 -0.0043197874 0.0022004340 0.0036901466 -0.0013366920 0.0063512073 0.0014690417 0.0026319545 0.0106181611 0.0356800703 -0.0001610061 0.0645843505 -0.0168921236 0.0108070930 0.0477130515 -0.1125173390 0.0148141247 0.0879996343 0.0040563502 -0.0190140245 -0.0160375037 -0.0122930998 0.0277142253 0.0037098206 -0.0112705273 0.0085130501 0.0065901627 0.0119246343 -0.0192016643 -0.0145451435 -0.0366054033 0.0281933358 0.0249076030 -0.0272453759 0.0279131139 0.0519642790 0.0093072946 0.1202995780 -0.0177522178 -0.0667171666 0.0271783825 0.0869457364 0.0017064966 0.0145622844 -0.0184478039 0.0219128781 0.0296624019 0.0346522871 -0.0395792148 0.0177754650 0.0090209633 -0.0498165390 0.0203578358 0.0104104560 -0.0162793875 -0.0171974482 0.0038685344 0.0114306830 -0.0416144640 -0.0135944058 0.0238493955 -0.0386271656 -0.0252323995 -0.0362557839 0.0253185681 0.0578452889 -0.0083102811 0.0321783671 0.0407983265 -0.0204002316 0.0185468809 0.0643227399 -0.0004856599 -0.0048125672 0.0000843910 -0.0000665393 -0.0085805182 0.0024964382 -0.0041341319 0.0026853338 -0.0009111321 -0.0020944589 0.0066952968 -0.0016745094 0.0012916267 0.0003835114 0.0009841969 0.0024350500 -0.0038433740 0.0005124874 0.0007859121 -0.0132529340 0.0042921200 -0.0102605787 0.0105803532 -0.0030774674 -0.0000443751 0.0025581870 -0.0010014323 0.0032423051 -0.0008390621 0.0023183442 0.0052725775 -0.0051049584 -0.0005923436 -0.0040632295 0.0026571544 0.0089351551 -0.0027930226 0.0025320950 -0.0020424275 0.0026072418 0.0026122776 -0.0057537162 0.0047304589 -0.0031453176 0.0009216721 0.0024798554 -0.0022892125 0.0116578633 -0.0097554518 0.0063932042 0.0115698122 -0.0081369628 0.0033041962 -0.0058610975 -0.0004133448 0.0010405028 -0.0040191053 0.0100581176 -0.0088546351 -0.0015116948 0.0057770718 -0.0057491414 0.0167446598 0.0030667948 -0.0015964933 -0.0000390393 0.0015011560 -0.0031495668 -0.0003160366 -0.0076767510 0.0044810928 -0.0014724294 0.0039307871 -0.0039024470 0.0009828184 -0.0034077369 0.0010767395 0.0032820432 -0.0023027441 0.0004256940 -0.0006997145 -0.0039000614 0.0014316840 0.0052385252 -0.0071128667 0.0038672156 0.0015094276 -0.0020926085 0.0010855600 0.0064210054 -0.0084465996 0.0044856047 -0.0013267786 -0.0019133340 0.0032397631 0.0044586593 -0.0044099593 0.0033208807 0.0026762640 -0.0019979648 0.0033259989 0.0079823130 -0.0038283023 0.0015599154 0.0026028941 -0.0017537897 -0.0016148977 0.0055015470 0.0023670179 -0.0020400349 0.0018809688 -0.0026382392 0.0014298204 0.0124032335 0.0075527972 0.0024268060 -0.0053035265 -0.0034850380 0.0014547670 0.0188193746 0.0139931686 0.0021593067 -0.0154161017 -0.0038372236 0.0010521440 0.0115328954 0.0054813443 0.0027947154 -0.0016417332 -0.0112750966 0.0016977892 0.0188484246 0.0076903747 0.0035348863 -0.0064896558 0.1321994978 0.0481988269 -0.0155171930 0.1285288390 -0.0299017578 -0.1731053975 0.1834179582 0.0958067582 0.0056155810 0.2214140817 0.1353301329 0.0000305430 0.0240446893 -0.0848349644 -0.1983837151 -0.1400557699 -0.0084096838 -0.0926541266 0.3747371080 -0.2017509297 -0.3208724624 -0.2011422021 -0.1571011961 -0.4777666505 0.0502831193 0.0088704933 0.0863708358 -0.0052886205 0.0188542972 0.0515087494 0.0445760295 0.0068240588 0.0838107199 0.0611705904 -0.0187074445 0.1029343999 0.0758528189 0.0287147675 0.1846449281 0.0564627161 -0.0470627974 -0.1562278952 0.0508781069 -0.0030461829 -0.0658440546 0.0317620393 -0.0149393853 -0.0877310916 0.0312254943 -0.0277907516 -0.0693005790 -0.0123728396 -0.0119115683 -0.0733333711 0.0420915435 -0.1302731780 -0.0803956365 0.0873138438 0.1298670224 0.0747862821 0.0060388745 0.0094275521 -0.0022924964 -0.1555308764 -0.0996645397 0.0144608910 -0.1113412583 0.1310038931 -0.0310963521 0.0049814334 0.0004236250 0.0088821957 0.0295191852 -0.0146219468 0.0143895812 0.0113006162 -0.0054514496 0.0081364848 0.0007085908 -0.0023226226 0.0079816588 -0.0112906951 0.0120133423 0.0019445536 0.0004009353 -0.0015805063 0.0001813199 -0.0120784900 0.0074840668 -0.0067809306 -0.0066154875 0.0091508297 0.0038365268 -0.0149319029 0.0190812911 0.0009517618 0.0036841323 -0.0041306665 -0.0002410003 -0.0229138716 0.0127746932 -0.0135056050 0.0120405861 -0.0299073556 0.0262985645 0.0087946357 -0.0051141744 0.0044809207 0.0077306123 -0.0048674931 0.0069545032 0.0056152535 0.0037715190 -0.0003380103 0.0007107253 -0.0013536629 -0.0048012376 0.0031942270 0.0021759398 -0.0063761337 0.0060520205 0.0023646996 -0.0020667501 0.0009353712 0.0028786996 -0.0021103596 0.0024272496 -0.0030437218 -0.0060295858 0.0040810018 0.0034273412 -0.0107847985 0.0106742279 -0.0013736911 0.0010555974 -0.0003862457 0.0032686309 0.0003704199 0.0037607062 -0.0067154182 -0.0066680545 -0.0012789217 -0.0042638060 -0.0039393266 0.0085679511 -0.0048787824 -0.0072755775 -0.0265167189 0.0399496018 -0.0128277792 0.0289884655 0.0451366044 0.1042959715 0.0023591390 -0.0172216354 0.0017675994 0.0063312559 -0.0088989572 -0.0047787584 0.0245021516 -0.0007634568 -0.0228597576 -0.0003311607 0.0059395174 0.0046811822 0.0077406712 -0.0156684383 -0.0051086140 0.0024467029 -0.0002055498 -0.0028475840 -0.0036533429 0.0045456458 0.0049086227 0.0041991015 -0.0004474853 -0.0089173368 0.0046006142 -0.0058745115 -0.0106999397 -0.0150612019 -0.0683376806 -0.0043194052 0.0527414068 -0.0166966605 -0.0380053074 -0.0086730098 0.0133883123 0.0137240827 -0.0120228319 -0.0072281800 -0.0166559579 0.0119995040 -0.0134536939 -0.0069760878 0.0143436589 -0.0040007054 0.0045440108 0.0011498015 0.0035769418 0.0046919103 -0.0046757078 0.0084673718 0.0074675505 -0.0025531274 0.0051396676 0.0052976558 0.0028629971 -0.0058044325 -0.0078507742 0.0047400913 -0.0080469859 -0.0107940722 0.0051566465 -0.0066620623 -0.0117183118 0.0166074280 -0.0754392735 -0.1061562370 -0.0407453486 -0.0747370762 -0.0798145534 -0.0460488961 -0.0055959232 0.0182295382 -0.0092237612 0.0439702228 0.0271759680 0.0575637654 0.0369819952 -0.0296127988 0.0646997665 -0.0647575945 -0.1059507563 -0.1076581657 -0.1363916422 -0.0901930794 -0.0970997119 -0.0131962032 0.0718291096 -0.0175290459 0.0148424874 0.0336128891 0.1361286466 0.0946209007 -0.0114509707 0.1387938532 -0.0976697313 -0.1375999020 -0.0147628909 0.0698350319 0.0773724292 -0.0306018054 0.0280143988 -0.0192043141 -0.0240429017 -0.0398624420 -0.0234683435 0.0416540113 -0.0456949142 0.0217716295 0.0808514993 0.0447849695 0.0925949321 -0.0534083882 0.1435401265 0.0914850434 -0.0650045355 0.0668239060 -0.0746352494 -0.0233483616 -0.0092492571 -0.0279720393 0.0968926989 -0.1122089813 -0.0024064747 0.1610065177 0.0640153527 0.1159256824 -0.0777522169 -0.0371680645 0.0200012361 0.0377652199 -0.0057612460 -0.0045181867 -0.0647573003 0.0520234812 -0.0132077897 0.0342850312 -0.0070306366 0.0033261498 0.0005442319 -0.0187049046 -0.0095890245 -0.0179077397 -0.0192140707 -0.0074572305 -0.0562234856 -0.0114083032 -0.1046851053 0.0283413925 -0.0104495116 0.0553858483 -0.1042914502 -0.0018136446 -0.1990932372 0.0765603131 -0.0030216836 0.1148181407 -0.0871202352 0.0054732773 -0.1004315686 0.0106461001 -0.0054847569 0.0576886548 -0.1478086597 0.0166756316 -0.1693297436 0.0483981775 -0.0057676118 0.1244287127 -0.0174554875 0.0262955010 0.0173947323 0.0024267821 0.0199478071 0.0009780925 -0.0804634230 0.0147818882 0.0825435227 0.0041427089 -0.0043668099 -0.0598495892 -0.1307388228 0.0203679612 0.1257007906 0.0418769396 -0.0139990013 -0.1302555798 -0.0466166451 0.0228809544 0.0864664605 0.0118606219 -0.0042234470 -0.0457118298 -0.0812848951 0.0254837936 0.1702237206 0.0454047061 -0.0247444230 -0.0887863799 -0.0171149422 0.0011859477 0.0013627941 -0.0298851206 0.0238786482 0.0105950148 -0.0069315792 0.0148455983 0.0096554899 -0.0404931044 -0.0161002077 -0.0090908417 -0.0288087757 0.0484548779 0.0258622870 -0.0672624115 0.0848126132 0.0695989634 -0.0469608421 0.0147906819 0.0537784764 -0.0003062517 0.0954498327 -0.0090698992 0.0069089904 0.0023250164 0.0104658762 -0.0047888729 0.0024760070 0.0035920382 0.0047074611 0.0003088159 0.0079971045 0.0086473055 -0.0045900960 0.0171374539 0.0080223108 0.0047527007 0.0232713703 0.0021100055 -0.0040166566 -0.0039083055 0.0016879060 -0.0024050106 0.0011468303 0.0001097372 -0.0007672560 -0.0041622859 0.0006988158 -0.0036368190 -0.0008479388 -0.0020074161 -0.0005361517 -0.0055547054 -0.0006735575 0.0008205333 -0.0040878867 0.0102879203 0.0197001383 0.0058058328 -0.0025157312 0.0064344249 -0.0024228130 -0.0086261642 -0.0028014190 0.0068309817 -0.0062145061 0.0110210810 -0.0064351185 -0.0873252172 0.0462687742 -0.0210541782 -0.0988470397 0.0873152909 -0.0592710259 -0.0373876311 0.0361208973 -0.0243282590 -0.0085669271 0.0083081935 -0.0077199098 0.0427613328 -0.0334652168 0.0217163629 -0.0015896037 0.0066055968 -0.0035587245 0.0504775492 -0.0390120493 0.0284390868 0.0225829217 -0.0148243700 0.0076930777 0.0593196206 -0.0480086704 0.0315014263 -0.0172874820 0.0196517459 -0.0148202339 0.0832246079 -0.0575281837 0.0480837164 -0.0838519385 0.0683050693 -0.0552196002 -0.0643525290 0.0346047019 -0.0082704683 -0.0820825762 0.0469323393 0.0211258980 0.0126723279 0.0277686996 -0.0080843456 -0.0247063983 0.0207019782 -0.0038737624 0.0347530786 -0.0104306863 -0.0085086858 0.0335469196 -0.0028691218 0.0120746035 0.0121831609 -0.0129787423 0.0180616904 0.0073049098 -0.0118811143 -0.0108541673 0.0514060014 -0.0238730549 -0.0178892993 0.0411961023 0.0065728622 0.0269476229 0.0115726157 -0.0224807066 0.0367686207 0.0025292425 -0.0241733638 -0.0238199268 -0.0625871030 0.0526116302 -0.0111897161 -0.0102339436 0.0148367269 -0.0208863111 0.0215493243 0.0031305150 -0.0259053605 0.0010290911 -0.0010232020 0.0051172507 -0.0203813056 0.0540619965 -0.0225058131 -0.0152991342 0.0280504935 0.0040264878 -0.0429534575 -0.0005610858 0.0529550943 0.0024513908 -0.0163757824 -0.0118256847 -0.0201638016 0.0565164028 0.0188086236 -0.0054489800 0.0025768139 0.0020468467 0.0115396369 -0.0103953579 -0.0133163945 -0.0038837484 -0.0043005228 0.0297114546 -0.0168856911 0.0096267102 0.0221015109 0.0570594016 0.2166205472 0.0237348455 -0.1818216586 0.0611594421 0.1146547375 0.0392472957 -0.0510233351 -0.0482363893 0.0199480252 0.0155089298 0.0258271015 -0.0260747402 0.0097838926 0.0040810294 -0.0306346089 0.0101968656 0.0033164181 0.0067280280 -0.0087944265 -0.0162456503 0.0133220280 -0.0149509621 -0.0181330321 0.0071996089 -0.0087281458 -0.0125576437 -0.0145986252 0.0084392756 0.0094558579 -0.0295074661 0.0177033276 0.0300135211 -0.0170446130 0.0097234432 0.0153619639 0.0026198633 -0.0048946377 -0.0119780665 -0.0030747877 -0.0042499857 -0.0097619185 -0.0008193601 -0.0043632375 0.0033961998 -0.0003078889 0.0026274205 0.0027370226 0.0066010860 0.0030805643 -0.0038486372 0.0078147597 -0.0075737478 -0.0107331750 -0.0094874683 -0.0112540409 -0.0103866461 0.0006567288 -0.0168465811 0.0140445412 -0.0025150263 0.0006580306 0.0037870704 0.0145314503 0.0097502066 -0.0022903117 0.0155476018 -0.0126534587 -0.0123074785 0.0016583173 0.0029697210 0.0021734157 0.0004434577 0.0010191421 -0.0012473314 -0.0008261167 -0.0021062291 -0.0005280849 0.0038652799 -0.0006742596 0.0005821319 0.0037231095 0.0003629564 0.0042547204 0.0012722538 0.0076591453 0.0020070123 -0.0004150343 0.0025178140 -0.0031081985 -0.0022260475 -0.0005799632 -0.0008727650 0.0083125256 -0.0007318750 -0.0019000578 0.0068036638 0.0014370952 0.0048573331 -0.0100674336 -0.0031216374 0.0016527901 0.0015980197 0.0010170963 -0.0000572525 -0.0020187107 0.0028504243 -0.0011066229 0.0001067287 -0.0000729131 -0.0004628740 0.0018030033 -0.0061790367 -0.0027514142 -0.0006596167 -0.0057579252 0.0022095886 -0.0028971283 -0.0037784850 -0.0166487306 0.0089304874 -0.0022074445 0.0056178561 -0.0076459806 -0.0029830979 -0.0304668928 0.0169267630 -0.0001842988 0.0141670181 -0.0113687395 -0.0018995012 -0.0130195978 0.0026066428 -0.0007367167 0.0048818244 -0.0215987824 0.0000172699 -0.0230893615 0.0051175047 0.0024096009 0.0114805544 -0.0022445547 0.0016386556 0.0014108496 -0.0013913277 0.0011641850 -0.0010529331 -0.0050823901 -0.0000434853 0.0016413430 -0.0023604822 -0.0008464688 -0.0038614115 -0.0070779725 0.0001939518 0.0018505524 -0.0003415883 -0.0008288405 -0.0069776469 -0.0035976263 0.0011821388 0.0014130529 -0.0029259116 -0.0007575268 -0.0026620644 -0.0041842559 0.0011825893 0.0043432244 -0.0019944159 -0.0020116152 -0.0032334499 0.0221558732 -0.0138589930 -0.0068613917 0.0604929794 -0.0669703286 -0.0055994947 -0.0156295585 -0.0664490445 -0.0395104254 0.0774777442 0.0196768605 0.0264199975 0.1014318444 -0.1672771751 -0.0139574961 0.3268716621 -0.4400545574 -0.3270560000 -0.0166283164 0.1105048505 -0.1061253469 0.1243863804 -0.3360979353 0.3503495159 0.0227165865 -0.0207833658 0.0710249423 -0.0284263849 -0.0021494034 -0.0338677483 0.0075326670 -0.0114060771 0.0239584543 0.0877617947 -0.0524107194 0.1821133954 0.0589380578 -0.0175428329 0.0923718785 -0.0921548689 -0.0049256835 0.1281591907 -0.1104795356 -0.0198269880 0.1986762199 -0.0125739460 -0.0037971611 0.0291357595 -0.0370563978 -0.0180069738 0.0870666838 0.0239523603 -0.0011731121 -0.0579906454 -0.0989788255 0.2052854929 -0.1283766182 0.1432353549 0.1694007788 -0.1411194285 -0.0101327563 0.0357223695 -0.1170652322 0.0757543723 -0.0452013602 0.0782681927 -0.0851048400 -0.0856976869 0.0961689570 -0.0151461194 -0.0875110194 0.0942961783 0.0097176808 -0.0193029545 0.0159697450 0.0016476466 -0.0089655076 0.0088326222 0.0180942135 0.0043737132 0.0048971778 -0.0038417069 -0.0034816462 -0.0004464360 -0.0068204141 0.0066086784 0.0045729110 0.0119284498 0.0112928581 -0.0032359727 0.0052749512 0.0147906466 -0.0116397290 -0.0042802928 -0.0156025336 -0.0046363756 -0.0161458500 0.0137285492 0.0124509773 0.0179826821 0.0207477841 0.0040668628 -0.0100722848 -0.0575315985 0.0508001417 -0.0174550380 0.0099087791 -0.0014138619 -0.0363889191 0.0412612210 -0.0045549402 -0.0010760864 0.0164590354 -0.0041233236 -0.0081529076 0.0075766700 -0.0073815217 -0.0000850866 0.0110230748 -0.0095696160 0.0208856892 -0.0121683999 0.0032875617 -0.0053150155 0.0114924504 -0.0022815385 0.0142757143 -0.0219396212 -0.0029309836 -0.0022583959 0.0183654752 -0.0180207833 0.0507944850 -0.0430667794 0.0201937041 -0.0111104784 0.0168600876 0.0010520833 0.0318110646 -0.0508769875 -0.0001645299 -0.0177050816 0.0141427007 -0.0088271564 0.0244163651 0.0083300186 -0.0469758410 -0.0245696820 0.0108196990 -0.0364481427 -0.0162461090 -0.0379685813 -0.0452945207 0.0000277385 0.0036529462 -0.0020443282 -0.0011617114 0.0025152222 0.0006788664 0.0034486142 -0.0025359130 0.0025524947 -0.0024821801 -0.0008925029 -0.0001493925 0.0024701811 -0.0071544793 -0.0033309835 -0.0020918382 0.0010762530 -0.0003940380 -0.0009610332 0.0004732884 0.0010291279 0.0005093777 0.0021389958 0.0020136133 -0.0035229874 0.0008349325 0.0010334149 -0.0058411151 -0.0222863541 -0.0045076842 0.0276520574 -0.0083683703 -0.0058958810 -0.0050164084 0.0149131979 0.0003503243 0.0015417038 0.0047800785 0.0002801506 -0.0016109211 -0.0031958877 -0.0018387658 -0.0044809488 0.0018889559 0.0044668224 0.0022614321 -0.0004109663 0.0014382752 -0.0025486373 0.0030514423 0.0048000889 0.0016788819 -0.0002935285 0.0006873446 -0.0044921975 0.0002237142 -0.0007957274 -0.0054132335 0.0012706251 0.0021316293 -0.0021568783 -0.0008705559 -0.0020366215 0.0045349367 -0.0423708117 -0.0230808604 -0.0133291630 -0.0336133430 -0.0269224188 -0.0267062391 0.0168937829 -0.0133863927 0.0008106983 0.0040922566 0.0081506486 0.0219964511 -0.0079792827 -0.0023261312 0.0120591394 -0.0130371009 -0.0390317322 -0.0297161430 -0.0517768839 -0.0284711766 -0.0553620278 0.0406551787 -0.0086806949 -0.0005256505 0.0025650461 0.0116789662 0.0468671215 -0.0023476328 0.0076934162 0.0284702951 0.0039324583 -0.0676624509 0.0071635830 -0.0402277396 -0.0440027458 0.0266111618 -0.0026968358 -0.0052582084 -0.0009833704 0.0031769084 0.0154142317 -0.0268348023 0.0067442225 -0.0069665532 -0.0244305107 -0.0112027945 -0.0552524535 0.0246681395 -0.0725550175 -0.0505168850 0.0639441340 0.0018250378 0.0119043256 0.0037340214 0.0021873300 0.0185331792 -0.0546226751 0.0325276896 0.0058013527 -0.0485922481 0.0036208534 -0.0802911771 -0.0212271620 -0.0072636575 0.0068080320 0.0170850807 0.0001268108 -0.0016004867 0.0325614873 -0.0191822191 0.0080327465 -0.0233336640 0.0119473540 -0.0018951501 -0.0064677330 -0.0190992428 -0.0186940139 0.0365965536 -0.0246770590 0.0666232889 -0.0537699029 -0.0061269306 -0.1142544500 0.0575853598 -0.0144712312 0.0854985209 -0.1092399854 0.0045206031 -0.2305396936 0.1192240007 -0.0146462532 0.1762636681 -0.0735178787 0.0016321377 -0.1001212240 0.0037043671 -0.0048529913 0.0178896990 -0.1669797084 0.0185206575 -0.2140060703 -0.0039151174 0.0018611549 0.0087894326 -0.0409594091 0.0015849734 0.0682998179 0.0105785020 -0.0036522409 -0.0115051014 0.0791364806 -0.0075254930 -0.1129983817 0.0010218787 -0.0065296225 0.0279770331 0.1705433474 -0.0182369093 -0.2392362663 -0.0016564511 -0.0145091804 0.0217847573 0.0774051538 -0.0169715862 -0.1138156959 -0.0415668452 -0.0014644367 0.1040973082 0.1495425854 -0.0228021827 -0.2371896852 -0.0999541919 0.0089964741 0.2036801788 0.0022586839 -0.0038142355 0.0007211282 0.0046722887 -0.0049976357 0.0053385745 -0.0018431784 -0.0119379158 -0.0053104685 0.0044177611 -0.0060020038 0.0063221108 -0.0134794135 0.0283699594 -0.0104671920 -0.0435649657 0.0885938361 0.0543922944 0.0231494917 -0.0403531651 0.0088866961 -0.0373815450 0.0436164353 -0.0846882804 -0.0023265381 0.0123549690 -0.0064450526 -0.0145204101 0.0044365098 0.0128018593 -0.0036530446 0.0024188655 0.0017933404 -0.0182846175 0.0044955025 -0.0392371092 -0.0055197436 0.0141098739 0.0036853216 0.0048473320 0.0100891153 -0.0006881498 0.0151095282 -0.0007316776 -0.0396338932 0.0064832244 -0.0001827210 0.0021913766 0.0082687754 0.0098970244 -0.0061512748 0.0167124673 -0.0019175899 0.0135224714 -0.0068225324 0.0139053625 0.0448169072 0.0072227039 0.0097542480 0.0508326029 -0.0104700166 -0.0178073705 0.0262207864 0.0267484089 0.0401567023 -0.0192271038 0.0191922939 -0.0059676208 -0.0237260497 -0.0712375189 -0.2846004022 0.3014156831 0.0998016925 -0.0243154753 0.0132414967 0.0350701942 -0.0167888164 0.0078845191 0.0203277461 -0.0037767855 0.0616890593 -0.0314380754 0.0198426822 0.0343359192 -0.0066054457 -0.0003251666 -0.0247096925 0.0043831335 0.0037918702 -0.0327264384 -0.0072904014 0.0484763631 0.0180748986 -0.0227274417 0.0422021850 0.0485711745 -0.0203751733 0.0111499046 -0.0287635869 -0.0103170375 0.0112619322 -0.0400630992 -0.0741970964 -0.1979285092 0.2203917982 -0.1087427811 0.1274019795 -0.0165902719 -0.1786019204 0.2456677385 -0.0311435967 -0.0272082081 0.1023200969 -0.0194083384 -0.0676282067 0.0751381789 -0.0511733331 0.0285827986 -0.0056390052 -0.0330839939 0.1019181044 -0.0747900041 0.0191787787 0.0201124697 -0.0069715893 0.0018485887 0.0577057087 -0.0952786087 -0.0187229813 0.0587367764 -0.0231121657 -0.0619588368 0.1712305571 -0.1661081352 0.0469361167 0.0128189787 -0.0163168106 0.0348868810 0.1268677482 -0.2039132278 -0.0047259974 -0.1624049012 0.1773547176 -0.0751203759 0.0873513797 -0.0150019935 -0.1977783332 0.0143625796 0.1264822351 -0.2272745824 0.0030773850 0.0025538349 -0.0032761610 -0.0299401815 0.0791279457 -0.0641727614 -0.0252025127 0.0421467376 -0.0168935604 0.0184430027 -0.0119010776 0.0166853142 -0.0056145214 -0.0152661336 -0.0031913967 0.0029681162 -0.0093086310 0.0011625594 -0.0119226504 0.0000330172 -0.0062065518 0.0043680456 -0.0032773062 -0.0030894743 0.0024540217 0.0060353606 0.0441601884 -0.0460372019 0.0019912447 0.0222457262 0.0010358156 -0.0064371156 -0.0009861923 0.0315819695 -0.0119937958 0.0268400867 -0.0014436108 0.0296080265 -0.0112605507 -0.0039392418 0.0104831521 -0.0062687484 -0.0088601392 -0.0042271231 -0.0075105031 -0.0268947483 0.0043326984 -0.0011116347 0.0255419437 -0.0066457139 -0.0106986172 -0.0010183822 0.0132573693 0.0092627813 0.0072187136 0.0029775135 0.0006977181 -0.0525211765 -0.0025375029 0.0046420716 -0.0819604379 0.0057576064 0.0434157223 -0.0364645003 -0.0103659288 -0.0180713909 0.0007632947 0.0037243793 -0.0049806115 -0.0047971946 0.0089361405 -0.0061645722 0.0045464259 -0.0102242151 0.0083366917 -0.0043956656 0.0094186074 -0.0027956702 -0.0025129294 0.0123513925 -0.0068657703 0.0100919309 -0.0147114762 0.0049929431 -0.0125326798 0.0193171876 -0.0126924210 0.0068664754 -0.0207166501 0.0155672437 -0.0035296693 0.0026425371 -0.0019921285 -0.0025304871 0.0229353519 -0.0105739342 0.0212119015 -0.0354682714 0.0158461211 0.0058894338 0.0045685599 -0.0044162569 -0.0079838276 -0.0134922660 0.0070309803 0.0049789610 0.0075388969 -0.0029567156 0.0062586790 0.0099360910 -0.0048685276 -0.0128754761 -0.0152147017 0.0066130785 0.0108609420 0.0082060006 -0.0073320200 -0.0199677136 -0.0324202138 0.0176357487 0.0025091752 0.0028425591 -0.0017220200 0.0117083226 0.0196073702 -0.0088929410 -0.0284028447 -0.0342471563 0.0165817023 0.0013305705 -0.0023406207 0.0004955650 -0.0045888856 -0.0050519843 0.0021605783 -0.0028849946 -0.0008304543 -0.0000224897 -0.0001089918 -0.0017565988 -0.0002784863 0.0044009966 -0.0133663846 0.0047023872 -0.0137214223 -0.0095081137 -0.0158959760 0.0213924737 -0.0086596039 0.0144516903 -0.0026890292 0.0050692084 -0.0248591206 0.0411229124 -0.0131530089 0.0295507642 -0.0111278246 0.0124757197 -0.0490228829 0.0058470920 -0.0071906620 0.0216401433 0.0027299954 0.0046689581 0.0010442494 0.0156404686 -0.0085606501 0.0492732912 0.0055875873 0.0135180472 0.0122016012 0.0078621395 -0.0131996389 -0.0154193843 -0.0058724189 -0.0119941131 0.0053564255 -0.0062620102 -0.0033370359 0.0214561138 0.0008283358 0.0071884317 0.0018569825 -0.0133392388 -0.0026156916 0.0480704383 0.0007844569 0.0144731736 0.0115355970 -0.0195339278 -0.0017566488 0.0151259951 0.0072958170 0.0064119786 -0.0214826902 -0.0402846054 0.0000399281 0.0283018955 0.0169678950 0.0113288450 -0.0444868744 -0.0087419953 -0.0462585629 -0.0101533312 0.0375712069 -0.0700653866 0.0712579648 -0.0768970661 -0.1573287521 -0.0860260193 0.0233969195 -0.0621035865 0.0538323453 0.0174501318 0.0472806516 -0.0097377179 0.1011486213 0.1622011644 0.0846326160 0.0532712461 -0.1113699753 0.0615109780 -0.0399337583 0.0179870623 -0.0641606938 0.0299554582 -0.0398512382 0.0617628073 0.0180947413 0.0204351616 -0.1464670682 0.0167328790 0.0177339323 -0.0437478429 -0.0177175341 0.0036215811 0.0382293831 0.0023738291 -0.0304797065 0.0810430768 0.0096990579 0.0242856867 -0.0822023016 -0.0213991676 0.0014351345 -0.0341304183 0.0122889393 -0.0240877627 0.0404263572 0.0450427934 0.0231571638 -0.0614858716 0.0028083988 -0.0306784581 0.1422403004 -0.0553494297 0.0856240212 -0.0205083878 -0.0733187904 -0.0649838195 0.0231960542 -0.0090074987 -0.0018050207 0.0008539686 0.0215626601 0.0260587755 -0.0101233023 0.0081313872 -0.0250694878 0.0092496706 -0.0033393080 -0.0169657492 0.0164764322 0.0018320061 -0.0018917104 0.0007107607 0.0001191201 -0.0011639224 0.0002151871 0.0006399349 0.0009725250 0.0004937548 -0.0004624796 -0.0008683225 0.0006419928 -0.0013557867 0.0003457477 -0.0007550745 0.0014765550 0.0002866720 -0.0010892755 0.0000626991 0.0025431249 -0.0012130289 0.0006387884 -0.0025984292 0.0010342317 -0.0024574942 0.0011964481 -0.0001461917 0.0024865039 0.0012618566 -0.0001348823 -0.0046891334 -0.0068856979 0.0070510599 -0.0057133331 0.0046578994 -0.0018598109 -0.0090210785 0.0101277249 -0.0023193653 -0.0020371525 0.0046168510 -0.0014431273 -0.0030239466 0.0025193037 -0.0014533412 0.0169233386 -0.0237178212 0.0046712407 -0.0129697095 0.0204859590 -0.0050710419 0.0162714278 -0.0234953467 0.0061617533 -0.0133477286 0.0179922968 -0.0057738352 0.0394910945 -0.0539301375 0.0123296026 -0.0276780851 0.0425185614 -0.0090976665 0.0347560746 -0.0508647818 0.0139516599 -0.0292338870 0.0399583128 -0.0109112711 -0.0074284101 0.0072296007 -0.0025742271 0.0041114888 0.0001453302 -0.0077668973 -0.0013375206 0.0041729368 -0.0069058003 0.0251014297 0.0216195161 -0.0047913395 -0.0022172202 0.0049228029 -0.0033053216 -0.0017666569 0.0007638699 -0.0000915254 -0.0010889671 -0.0032802625 0.0044377408 -0.0008511806 -0.0007640744 -0.0014989696 0.0000570012 0.0011115334 -0.0011050520 -0.0025620527 0.0011586523 0.0039402541 0.0007007409 -0.0003768062 -0.0003433084 -0.0008366354 -0.0014122950 0.0001225231 0.0001125496 0.0015525844 0.0000149667 0.0031078500 0.0073274253 -0.0003295240 -0.0008017495 0.0007924213 0.0049229693 0.0022675417 0.0017475578 -0.0062071263 -0.0013522338 0.0054145274 0.0007728844 -0.0054410906 -0.0095720561 0.0005159688 0.0022317094 0.0004047778 0.0115514619 0.0047898812 -0.0012889535 -0.0006168592 -0.0013275365 0.0024077445 0.0044565119 0.0041138614 -0.0006853899 -0.0004053838 0.0006820524 0.0013292789 -0.0027228096 0.0013808672 0.0038884188 -0.0004655383 -0.0001263429 0.0018920439 0.0027351896 0.0106965495 -0.0347208751 0.0114556297 -0.0308332189 0.0587326489 -0.0467127658 0.0076290263 -0.0280890494 0.0041886602 0.0185316151 -0.0505025686 0.0215288445 -0.0332494755 0.0531691334 -0.0380926605 -0.0050810851 -0.0153331267 -0.0042038620 -0.0692254309 0.1450355778 -0.0905949027 0.0090665224 -0.0359724306 0.0100607616 0.0139011199 -0.0181556792 0.0230958741 -0.0740148163 0.1427980222 -0.0885999878 -0.0064588947 -0.0157142247 -0.0036286175 -0.1108640267 -0.1518894190 0.0879673134 0.0925422825 0.1245858775 -0.0581787612 0.0354663808 0.0531686618 -0.0224116818 -0.1003438529 -0.1388339247 0.0807061447 0.0801763665 0.0996831507 -0.0386438818 -0.2542431253 -0.3350017379 0.1771314004 0.1830421480 0.2499482428 -0.1219049024 0.0084389191 0.0210219703 -0.0170048610 -0.2380090315 -0.3374842569 0.1764384054 0.1583945376 0.1995467644 -0.0926819914 -0.0227447035 0.0058747016 0.0133958321 0.0290812922 0.0224971573 -0.0016233899 -0.0219455911 0.0036401543 -0.0059850192 -0.0049924329 -0.0219011764 0.0004671462 0.0128852070 0.0530969747 -0.0170276763 0.0242736905 0.0453331285 0.0142330027 -0.0105025631 0.0216954786 0.0070374129 0.0062548724 -0.0304657155 0.0133017662 -0.0460835835 0.0309443809 0.0400415157 0.0021135866 -0.0547966836 0.0452529186 0.0346968500 0.0050953621 -0.0199803872 0.0043709681 -0.0306744833 -0.0268818096 0.0750731969 -0.0040165666 -0.0432001762 -0.0011513733 -0.0511354370 -0.0514690114 0.0055218912 -0.0451532800 -0.0158674974 -0.0001708337 -0.0504560315 0.0137112559 0.0255287264 -0.0121386565 0.0188204499 0.0119253515 0.0276565940 0.0228005405 0.0635636074 -0.0165615902 0.0405314989 0.0132297009 0.0446176385 0.0434258738 -0.0142946256 -0.0133630246 -0.0042543137 0.0162951562 0.0274697158 -0.0109126060 -0.0516696363 -0.0100328558 -0.0326507340 0.0200521272 0.0485158298 -0.0386673029 -0.0000147257 -0.0028076007 -0.0003018688 0.0031741255 -0.0049771451 0.0041379485 -0.0044960970 -0.0097651761 -0.0049840201 0.0026512983 -0.0030687585 0.0036874057 0.0016211048 0.0008168478 -0.0004065050 0.0048769846 0.0157357591 0.0132383027 0.0103124953 -0.0167385555 0.0048654620 -0.0072212414 -0.0004279219 -0.0144893649 -0.0072378034 0.0064318712 -0.0175049392 0.0057225207 -0.0058071195 0.0335678493 -0.0005981985 -0.0036792976 0.0083871281 0.0004821841 0.0007318708 -0.0077635957 -0.0054972591 0.0034774235 -0.0219326613 0.0013398708 -0.0064161085 0.0160839938 0.0044309735 -0.0001365002 0.0114363609 -0.0052393278 0.0058431990 -0.0072897786 -0.0074079715 -0.0058294199 0.0069096127 -0.0100711885 0.0073472323 -0.0228686911 0.0176900439 -0.0293705500 0.0085267019 -0.0003132330 -0.0035838999 -0.0022940435 0.0055421233 0.0038648632 0.0023081936 -0.0179550252 -0.0088172473 -0.0016975996 -0.0015136406 0.0072436169 0.0056641722 0.0119393250 0.0251831901 -0.0377374869 -0.0131241329 0.0021124387 -0.0014295428 -0.0048577317 0.0013907338 -0.0008890020 -0.0009988822 0.0007634093 -0.0075702091 0.0042554309 -0.0034967271 -0.0044101792 0.0005002571 0.0001129548 0.0032581192 0.0017154285 -0.0004240053 0.0041806927 0.0018167833 -0.0048462329 -0.0036858673 0.0032690585 -0.0078497415 -0.0066176090 0.0014697429 -0.0007902969 0.0046025785 0.0057934427 -0.0010075790 0.0070733012 0.0100365523 0.0193324804 -0.0233940252 0.0131809074 -0.0068984639 0.0010990772 0.0184996832 -0.0144160190 -0.0001512631 0.0068321289 -0.0183341549 0.0044189518 0.0112303061 -0.0080751817 0.0084802418 -0.1166681303 0.1674064408 -0.0366160883 0.1045233499 -0.1591801950 0.0418136851 -0.1083421622 0.1558576355 -0.0378978628 0.0981263636 -0.1340578917 0.0390225662 -0.2692512974 0.3738213727 -0.0905746383 0.2148000511 -0.3232523115 0.0737352153 -0.2345404940 0.3421905531 -0.0901329958 0.2168703113 -0.3020885165 0.0747341750 0.0286111363 -0.0266111858 0.0128385938 -0.0087386042 0.0031117665 0.0197513996 -0.0010549307 -0.0121044805 0.0226596611 -0.0034370674 -0.0031625280 -0.0018388777 0.0077940949 -0.0172655879 0.0115188829 0.0037446939 -0.0060688638 0.0026426278 -0.0086042382 0.0005385225 -0.0004538574 0.0013301259 0.0017336482 0.0006623637 -0.0008080285 0.0040620334 0.0016628513 0.0018625094 0.0032975674 -0.0006112122 -0.0002417857 0.0003854994 0.0000918665 -0.0011533156 -0.0007341491 -0.0067200625 0.0079934820 -0.0026705982 0.0014099051 0.0049181039 0.0108489683 0.0044024527 -0.0134186613 0.0047341037 0.0028206353 0.0040608001 -0.0072450692 -0.0023727287 0.0054622815 0.0232566793 -0.0185591136 0.0030760445 -0.0315976148 -0.0125634099 -0.0094745794 0.0067903685 0.0366883237 -0.0021485103 0.0009786895 -0.0004487406 0.0011448985 -0.0009126102 -0.0031643651 -0.0032433376 0.0013684155 0.0005698655 0.0140987639 0.0001456951 0.0101381556 0.0125690440 -0.0098665059 -0.0024258750 0.0036822388 0.0031337545 0.0031336410 -0.0034931133 0.0129804073 -0.0015806723 0.0131245126 -0.0182681451 0.0169964868 -0.0033050034 0.0169654119 -0.0064870174 -0.0021876278 0.0080905673 -0.0043311054 0.0120446378 -0.0250638479 0.0162024721 -0.0077128120 0.0207517849 -0.0045014685 0.0291142437 -0.0480114470 0.0333195816 -0.0059522862 0.0291683486 -0.0150707840 -0.0033369817 0.0043861069 -0.0069453224 0.0257178160 -0.0606139044 0.0350910156 -0.0178639200 0.0359959649 -0.0110377195 -0.0321328068 -0.0406598207 0.0181590265 0.0353362790 0.0501185768 -0.0249367819 -0.0040705481 -0.0055902705 0.0043266351 -0.0329189060 -0.0436004331 0.0226091431 0.0404438540 0.0499161992 -0.0299899491 -0.0651799140 -0.0873628741 0.0391003069 0.0798702231 0.1110522134 -0.0556974546 -0.0018590676 -0.0015442736 0.0043463413 -0.0727200191 -0.0944895016 0.0496977341 0.0862042984 0.1084866952 -0.0623375324 0.0065874818 -0.0016471380 -0.0037324303 -0.0053630093 -0.0080860822 0.0000467508 0.0072658019 0.0006316798 0.0011012992 -0.0049471891 0.0021514282 0.0006107752 -0.0014543225 -0.0065659964 0.0023128924 -0.0047066810 -0.0048036019 -0.0053941805 0.0029311507 -0.0024755180 0.0006411189 -0.0014832455 0.0038282310 -0.0048179191 0.0084379650 -0.0038554009 -0.0015231394 -0.0029972567 0.0066327166 -0.0114436163 -0.0025330444 -0.0011907585 0.0034215080 0.0012034707 0.0034088933 0.0037101380 -0.0053071917 -0.0004098475 0.0089292463 0.0033028152 0.0058563845 0.0091934442 -0.0007510647 0.0108764922 0.0030117764 -0.0005827327 0.0121718873 -0.0038412555 -0.0059029994 0.0020086750 -0.0068347818 -0.0048173161 -0.0069125275 -0.0050603515 -0.0148677660 0.0030844074 -0.0133842816 -0.0057200092 -0.0102851587 -0.0082465455 0.0031111942 0.0034172671 -0.0015349442 -0.0058785217 -0.0069209433 0.0019397071 0.0133194318 0.0024762785 0.0035155959 -0.0068575828 -0.0122324873 0.0089547712 0.0019920021 0.0082516098 -0.0000732653 -0.0094629625 0.0150282355 -0.0179989617 0.0191387801 0.0310708813 0.0141676110 -0.0048102824 0.0091290469 -0.0106243864 -0.0067551921 -0.0058679098 -0.0085012337 -0.0214027369 -0.0711778872 -0.0687148443 -0.0368151370 0.0682560604 -0.0331294851 0.0250657004 -0.0077972573 0.0527506576 0.0381667257 -0.0463519452 0.0757352874 0.0079390079 0.0204591129 -0.1739062583 0.0144098120 0.0153478580 -0.0509924305 -0.0148960824 0.0035943685 0.0434120359 0.0098744449 -0.0341021437 0.0924189275 0.0122022523 0.0300573343 -0.0943191593 -0.0201006512 0.0040621817 -0.0460018942 0.0173665685 -0.0249175864 0.0398068512 0.0414573172 0.0297592223 -0.0543828937 0.0211424576 -0.0323926673 0.1405854684 -0.0585712852 0.0950196165 -0.0393469055 -0.0694513931 -0.0609577411 0.0107940215 -0.0064866429 0.0011239721 -0.0069037520 0.0121601818 0.0115874134 -0.0061676140 -0.0095852198 -0.0222139029 0.0217007175 0.0079003706 0.0160828888 -0.0254576040 -0.0113763345 -0.0027396764 0.0027025117 -0.0049989333 0.0000244483 0.0008622860 -0.0017593483 0.0033399800 -0.0108242649 0.0049162558 -0.0046659293 -0.0055426892 -0.0021130731 0.0021325983 0.0038220430 0.0020646624 0.0018006082 0.0039750174 0.0007085543 -0.0016164985 -0.0075660791 0.0061752535 -0.0143335090 -0.0074610606 -0.0016961775 0.0016284410 0.0062902183 0.0091777803 0.0023481694 0.0091401348 0.0066829959 0.0171815517 -0.0235028720 0.0107877749 -0.0121099213 0.0004757334 0.0150663058 -0.0191025143 0.0012262612 0.0057992444 -0.0150256894 0.0024986302 0.0091865060 -0.0092222618 0.0076724251 -0.0489313893 0.0693041296 -0.0134960641 0.0371244115 -0.0608284597 0.0164734717 -0.0452846539 0.0634163618 -0.0146463262 0.0356496890 -0.0475803151 0.0164762817 -0.1131622681 0.1548733259 -0.0337236400 0.0788289411 -0.1225573688 0.0288629894 -0.0958308457 0.1394073181 -0.0379927204 0.0786146243 -0.1088250658 0.0290997591 0.0225149346 -0.0246044605 0.0112875644 -0.0061647379 0.0039996277 0.0196503778 -0.0107150523 -0.0115249375 0.0267388811 0.0202629943 0.0245988961 0.0072796029 0.0049205085 -0.0125484704 0.0089002462 0.0036360116 -0.0043262341 0.0020699996 -0.0027128092 0.0025262588 -0.0031990622 0.0014638372 0.0029399900 0.0010817932 -0.0006025264 0.0003460050 0.0014520672 0.0027591953 -0.0003327116 -0.0024832460 -0.0010957132 0.0008611852 0.0007202397 0.0000449492 0.0002763164 -0.0047167524 0.0050766272 -0.0018797301 -0.0009054445 0.0012466918 0.0007124871 0.0031775821 -0.0047469026 0.0007101834 -0.0034436109 0.0005875971 -0.0068836103 0.0029639564 0.0046189716 0.0030817412 -0.0039310711 0.0047195125 0.0005693615 -0.0024373712 -0.0053375095 0.0014497416 -0.0003874450 -0.0064468177 0.0020081483 0.0013519413 0.0012823000 -0.0026865177 -0.0049012664 -0.0048775725 0.0009041152 0.0006160210 0.0071813763 -0.0005712435 0.0044831542 0.0077253788 -0.0056423089 -0.0029777014 0.0032662797 0.0005163368 0.0003184393 0.0169690087 -0.0455813644 0.0135301162 -0.0404749993 0.0801429490 -0.0637390783 0.0172672630 -0.0506074722 0.0132704789 0.0221627167 -0.0592971455 0.0247504361 -0.0434234156 0.0791593385 -0.0565284230 0.0070463611 -0.0381571783 0.0026315521 -0.0957192121 0.1998747784 -0.1255146240 0.0250941627 -0.0753111040 0.0284114495 0.0133784889 -0.0207202006 0.0275712722 -0.0999130889 0.2104047174 -0.1288807024 0.0149922926 -0.0552003886 0.0119970486 0.0623691423 0.0830629059 -0.0223235559 -0.0843755004 -0.1150300139 0.0606773364 0.0262727119 0.0368230125 -0.0231157419 0.0705364255 0.0905725878 -0.0432324956 -0.1001105973 -0.1215282006 0.0869624255 0.1163605169 0.1709961895 -0.0574644615 -0.2011415167 -0.2674063835 0.1344496842 0.0097796049 0.0111280597 -0.0220099834 0.1500089229 0.1799263743 -0.0960714947 -0.2167088362 -0.2750600445 0.1736801659 -0.0300172542 0.0033382052 0.0165867911 0.0327214300 0.0244346391 -0.0010488163 -0.0317016554 -0.0003797604 -0.0069753189 0.0194564869 -0.0175002390 -0.0010631139 0.0101285716 0.0539118963 -0.0181088091 0.0255904445 0.0449546460 0.0227065249 -0.0165373226 0.0219915235 0.0061067203 0.0040830515 -0.0295416360 0.0218299728 -0.0544250586 0.0318342138 0.0369617730 0.0046665056 -0.0530497507 0.0596265152 0.0291138900 0.0077076155 -0.0185234110 -0.0036665700 -0.0288891335 -0.0262730540 0.0660819376 -0.0009711998 -0.0466480163 -0.0127184793 -0.0496887332 -0.0572247648 0.0065221688 -0.0474804507 -0.0175234387 0.0016994384 -0.0533257348 0.0142239192 0.0253539698 -0.0112770757 0.0256799725 0.0165241794 0.0294857753 0.0223826734 0.0634794494 -0.0156929191 0.0534973053 0.0189423446 0.0462350172 0.0410653442 -0.0157562557 -0.0142022216 0.0026647773 0.0213756903 0.0293743447 -0.0117241168 -0.0592570534 -0.0103267835 -0.0202310147 0.0257963630 0.0518793596 -0.0421085596 0.0020138392 0.0056865329 0.0003830835 -0.0057030027 0.0096202930 -0.0129320887 0.0137295853 0.0220484872 0.0108298732 -0.0022905250 0.0073832827 -0.0076498033 -0.0057790211 -0.0032684328 -0.0034008077 -0.0201089416 -0.0309018854 -0.0270523152 -0.0169001404 0.0306827146 -0.0162639750 0.0085145971 -0.0002179623 0.0171030098 -0.0125325233 0.0272803654 -0.0313301776 -0.0217244701 -0.0068116364 0.0855915322 -0.0115523709 -0.0073489747 0.0239557780 0.0058931738 0.0015002030 -0.0349673711 -0.0039315249 0.0234238100 -0.0555143308 -0.0121038991 -0.0132918437 0.0578237361 0.0084081057 -0.0000708823 0.0276904906 -0.0080053265 0.0111290426 -0.0281256090 -0.0331280628 -0.0148228786 0.0403210401 0.0015966303 0.0153793458 -0.0988650511 0.0302306151 -0.0429833260 0.0055139616 0.0469884513 0.0454357458 -0.0199244815 0.0073748412 0.0037268076 -0.0057044149 -0.0079122682 -0.0171979049 0.0104879775 -0.0042453100 0.0088095136 -0.0001742045 0.0008883387 0.0082663071 -0.0121092397 0.0175659372 -0.0161796435 0.0111459200 0.0051187907 -0.0034416764 0.0024928890 -0.0097407950 0.0061435053 -0.0077287425 0.0002926505 0.0018751247 -0.0034961000 -0.0045632575 0.0051904340 -0.0029564646 -0.0075895725 0.0053087771 -0.0021494864 -0.0096239838 0.0066928679 -0.0073639203 0.0104658641 -0.0077522854 0.0023262346 -0.0003646819 0.0017549230 -0.0023080494 0.0020733479 0.0003693181 0.0033551509 0.0003874162 0.0059564130 -0.0085906684 0.0036854081 -0.0069045061 0.0021441526 0.0051411170 -0.0101503047 0.0041461288 0.0027598593 -0.0042521037 0.0009305905 0.0021762303 -0.0035386341 0.0010148271 -0.0039683372 0.0054806595 -0.0011699959 0.0031057462 -0.0045349776 0.0005455322 -0.0039489931 0.0048940192 -0.0016761335 0.0012466491 -0.0026729983 0.0009750813 -0.0104142671 0.0143112192 -0.0036436294 0.0080795324 -0.0105090344 0.0025674442 -0.0070234979 0.0096255401 -0.0034017475 0.0027663795 -0.0049920634 0.0013057082 0.0052511952 -0.0073875894 0.0019180282 0.0015305651 -0.0026724422 0.0080615181 -0.0047344742 -0.0037884687 0.0103641972 -0.0231075736 -0.0161376488 -0.0037904044 0.0020245594 -0.0066016131 0.0053146774 0.0018552201 -0.0034646476 0.0015359457 -0.0010233052 0.0001825881 -0.0002376322 0.0002654949 0.0012300091 0.0003157073 0.0000152991 0.0004799602 -0.0008011667 0.0010052838 0.0007146520 0.0004736327 -0.0004415768 0.0004157593 0.0004897790 -0.0004278216 -0.0007704596 -0.0036496934 0.0037758732 -0.0000609752 -0.0018619625 -0.0010682331 -0.0020089416 -0.0009101109 0.0000105641 0.0006552137 -0.0032377078 -0.0005415675 -0.0001481113 0.0007501132 0.0001888709 0.0008725802 -0.0010482757 0.0008171998 -0.0029078695 -0.0007106341 0.0025219251 0.0003582730 0.0042463447 -0.0016563618 0.0004876833 0.0014510281 -0.0003177478 -0.0005072173 0.0002220465 -0.0002023610 -0.0004021089 0.0000245801 0.0046902942 0.0003742464 -0.0006592576 0.0067360517 -0.0001380295 -0.0035854505 0.0027477470 0.0012831225 0.0017466332 0.0053547011 0.0115993006 0.0081730747 -0.0593057223 0.1493786996 -0.0671547595 0.0829386753 -0.1798168708 0.0975992788 -0.0011331584 0.0021497722 -0.0052578352 -0.0661593024 0.1599657928 -0.0891570729 0.0949990996 -0.1660039144 0.1063243988 -0.1355212196 0.3353977082 -0.1587989636 0.1587819805 -0.3549509376 0.1861784483 -0.0108890449 -0.0013460395 -0.0081543523 -0.1596606884 0.3634816959 -0.2041507139 0.1870645699 -0.3485333774 0.2109112021 -0.0077852452 -0.0014482858 -0.0117776485 0.0117774619 0.0235022363 -0.0133565107 -0.0183030504 -0.0258646354 0.0139139364 -0.0115548254 -0.0036231930 -0.0043777608 0.0153567714 0.0269979096 -0.0314330676 0.0040380658 0.0012939320 -0.0181525206 0.0405093593 0.0615874674 -0.0323053005 -0.0014105456 -0.0111353761 0.0150919933 -0.0155720432 0.0091586348 -0.0032805218 0.0460295495 0.0685206356 -0.0554291473 0.0051672661 -0.0089045017 -0.0037879751 -0.0269015058 -0.0004091331 0.0032567341 0.0255255690 -0.0058265257 0.0055603304 -0.0026213469 0.0094891998 0.0028609445 -0.0086681103 -0.0295005522 0.0087154409 -0.0170294601 -0.0245108096 -0.0142881677 0.0092275327 -0.0135399309 0.0067995280 -0.0093119474 0.0184774954 -0.0121152299 0.0359216719 -0.0200432489 0.0003652049 -0.0094250150 0.0330632674 -0.0350371544 -0.0153441978 -0.0026072808 0.0196064669 -0.0050363554 0.0179171351 0.0143953418 -0.0315568296 0.0014966501 0.0435915634 -0.0009554496 0.0283962199 0.0292561324 -0.0038234428 0.0226047221 0.0188815304 0.0005865599 0.0259876314 -0.0082703935 -0.0041730335 0.0049888369 -0.0109781163 0.0019939046 -0.0167405059 -0.0096373569 -0.0192367922 0.0065543708 -0.0306883200 0.0049760711 -0.0255006712 -0.0257702870 0.0133867092 0.0038594707 -0.0034963497 -0.0087725937 -0.0155439091 0.0149862769 0.0387961408 0.0016946029 0.0045100244 -0.0159501214 -0.0229080438 0.0358973011 0.0018428058 0.0022776487 0.0005897314 -0.0027125905 0.0047082373 -0.0071376157 0.0089407332 0.0107135108 0.0053961348 -0.0002745859 0.0027982948 -0.0026096842 -0.0040072896 -0.0008260977 -0.0005625898 -0.0149589313 -0.0061390212 -0.0034299833 -0.0034589955 0.0067213693 -0.0051676653 -0.0002193215 0.0035495739 -0.0015263862 0.1429992770 0.0630313270 -0.0433757259 -0.0768425286 0.0063880087 -0.0701877342 0.0255918991 -0.0192767618 -0.0596807006 -0.0042465477 0.0590649442 -0.0086641281 0.0424479280 0.0648296649 0.0149288855 -0.0240481484 0.0579836110 0.0027194509 0.0234979738 0.0459404003 -0.0376889912 -0.0145412929 -0.0264235613 -0.0374199003 -0.0752807108 0.0719863832 -0.0312401453 0.0704937190 -0.0335003615 -0.0313667625 -0.0147044427 0.0171641840 0.0154209730 -0.0367225291 -0.0203096733 0.0065624050 -0.0156732676 -0.0171806759 -0.0073256006 0.0409725571 0.0091005856 0.0031198417 -0.0018076737 -0.0222826185 -0.0137459376 -0.0128054545 -0.0040559752 -0.0092193244 -0.0017767578 0.0120325228 0.0036159840 -0.0037130816 0.0111155797 0.0042197253 -0.0154826948 0.0091070636 -0.0101521939 0.0097433146 -0.0007399384 0.0101062664 -0.0031530094 0.0028839885 0.0026176289 0.0013456634 -0.0049511709 0.0066963024 -0.0035960331 0.0090639213 0.0006378944 0.0255877506 -0.0163127259 0.0190642527 0.0066879492 -0.0047841488 0.0017463625 0.0289435439 -0.0218870610 0.0233175224 -0.0127926154 0.0011217223 -0.0102339419 -0.0034818583 -0.0194863139 0.0105825262 -0.0064499701 -0.0210862961 0.0218310988 0.0122097713 -0.0073670211 0.0030219970 0.0030055252 -0.0098200358 -0.0021069777 0.0037631185 0.0021858518 -0.0043963316 0.0020340848 0.0091855663 -0.0021429674 -0.0017941998 0.0039450034 -0.0007363470 -0.0051481745 0.0038889188 -0.0065147465 0.0031521130 0.0061753779 -0.0100343771 -0.0055701022 0.0213006146 -0.0031168188 -0.0078475253 0.0089303849 0.0038725430 -0.0124921378 0.0105586482 -0.0111874965 0.0072494357 -0.0205176963 0.0004257367 0.0071002937 0.0004080097 0.0051849180 0.0051599559 -0.0032190695 0.0060932728 -0.1055067010 0.0888783073 -0.0419742915 0.0035580499 -0.0140979555 0.0127767827 0.0046029217 -0.0074938814 0.0042837491 -0.0018948617 0.0011676712 0.0002138665 0.0007632373 0.0030488053 0.0007461279 -0.0030176059 -0.0006446784 -0.0025854872 0.0029868897 0.0019096990 0.0016945914 -0.0011436009 0.0010425077 0.0010726453 0.0004573621 -0.0022423803 -0.0092626831 0.0101839715 0.0001841746 -0.0061385330 -0.0007160616 0.0009776763 -0.0006809744 -0.0088102166 0.0001908280 -0.0110214366 -0.0009702659 -0.0121226335 -0.0005785560 0.0023363012 -0.0013371775 0.0040265744 0.0006023171 0.0035896476 0.0021952130 0.0066362951 0.0005991904 0.0006097637 -0.0065310939 0.0016824485 0.0039368610 -0.0001231793 -0.0029579320 -0.0012555309 -0.0013307091 -0.0014046294 -0.0003689900 0.0125151110 0.0010697993 -0.0049305566 0.0172427880 0.0006396882 -0.0101884941 0.0077964136 0.0033901855 0.0029403973 0.1959843788 0.0770889066 -0.0716802773 0.1905270431 0.0470295101 -0.0109535795 0.1589545371 0.0652310877 -0.0019836239 0.0211246742 -0.0007778129 -0.0032009986 0.1620855024 0.0006644770 -0.0775787503 0.1626328959 0.0583215824 -0.1028737839 0.1611822119 0.0092032641 -0.0122282724 0.2184974435 0.0746675520 -0.0722640392 -0.1369730581 -0.0360207668 0.0390926111 0.2680003135 0.0190500956 -0.0294917429 0.1252749601 0.0687983685 -0.0814131575 -0.1058732090 0.0585288110 0.0002780045 -0.0875770331 0.0587219094 0.0117608695 -0.0024167479 0.0137459316 -0.0053357104 -0.1018324121 0.0312816670 -0.0449621243 -0.1041986839 0.0557518352 -0.0533373870 -0.0949000873 0.0226169029 -0.0027203596 -0.1398810628 0.0616364366 -0.0247543463 0.0856305947 -0.0438336649 0.0160565191 -0.1670439105 0.0565060168 -0.0090233027 -0.0933414090 0.0420998626 -0.0344548724 -0.2118246519 -0.0617244523 0.0232280356 -0.1967211013 -0.0388400516 0.0837763411 0.1182950282 -0.0768661258 0.0063574022 0.1193772645 -0.0636074759 0.0432124224 0.0102599514 -0.0573188100 -0.0048044798 -0.0651862292 -0.0341854477 0.0568470797 -0.0197811425 -0.0735258876 -0.0083324575 -0.0351301405 -0.0125516224 0.0271928943 -0.0353994021 -0.0696411407 -0.0319246667 0.0158486803 0.0546864474 -0.0003749925 -0.1207589098 -0.0079657405 0.0649096497 -0.1201298108 0.0052614054 0.0695851306 -0.1484679022 -0.0049206632 0.0441913266 -0.1400010573 0.0471592405 0.0650462926 0.0474002635 -0.0589454709 0.0212919086 -0.0214412623 -0.0618291479 -0.0036768589 0.0788344178 -0.0448606935 0.0651418241 0.0828177992 -0.0157133539 0.0509011138 0.0973817982 -0.0481782038 0.0841325469 0.1064783725 0.0213315756 0.0640029555 -0.0272807272 -0.0580656277 0.0038873949 0.0234292170 -0.0070880294 -0.0026922339 -0.0471225512 -0.0560120678 -0.0009798554 0.0093582186 0.0582713397 -0.0387825110 0.0040764725 0.0058651526 0.0023818489 -0.0039820834 0.0082587832 -0.0151759685 0.0169586080 0.0243246299 0.0141960575 0.0012221772 0.0096918395 -0.0060470700 -0.0124513841 0.0022162080 -0.0018646512 -0.0448939597 0.0067704993 0.0091901666 -0.0014217504 0.0033672614 -0.0085693442 -0.0107980535 0.0160368854 -0.0251331228 -0.0585600629 -0.0733573554 0.0610968749 -0.0062474848 -0.0446909595 -0.0364388538 -0.0381466739 -0.0372237547 0.0070743756 -0.0147391826 -0.0064191136 -0.0571991815 0.0351265865 -0.0653982373 0.0327392621 0.0227581282 0.0925939433 -0.0068823444 -0.0014847761 0.0324079127 0.0141817229 -0.0210105988 0.0366736338 -0.0275922135 -0.0757587900 0.1349944836 -0.0547425097 0.0740065663 0.0282419449 -0.0005957447 0.0652563145 -0.0105843875 -0.0105193790 0.1214991980 0.0300606611 0.0399514177 0.0839464899 -0.0314518583 0.0093176482 -0.0977369327 -0.0810475085 -0.0885125778 -0.1394070139 0.1146634138 0.0446827121 -0.0323920711 0.0216212318 0.0007981765 -0.0249500132 0.0068082429 -0.0054415290 -0.0146049560 -0.0011898500 0.0001150924 0.0033136848 0.0048996389 -0.0079854932 0.0043353046 -0.0136533286 0.0038842254 -0.0077021319 -0.0045998123 0.0035908692 0.0173165280 -0.0065611807 0.0022877445 0.0074313809 0.0081232870 -0.0083578696 0.0058703910 -0.0312024616 -0.0003915908 -0.0150986217 0.0009506780 0.0088474238 0.0271044499 -0.0012188151 0.0107650707 -0.0196108074 -0.0130590289 0.0026207747 -0.0165060707 -0.0122418246 0.0058794648 -0.0251113203 -0.0069875587 0.0202608041 0.0072284246 0.0065859055 0.0003010046 -0.0029578355 -0.0038901935 0.0002268358 0.0090069990 0.0017292016 -0.0018105597 0.0076532094 0.0124102967 -0.0034496522 -0.0000090466 -0.0028073249 0.0025918306 -0.0045951985 0.0011561260 -0.0028762454 0.0142271008 -0.0013509331 -0.0070951794 0.0179231679 0.0131804635 0.0046636093 -0.0000636639 -0.0077246166 0.0121896282 -0.0101014236 0.0018892626 -0.0086917618 -0.0034804486 -0.0066010045 0.0010737138 0.0083383007 0.0127395269 -0.0171164782 -0.0335066870 0.0411348964 -0.0117316439 -0.1437787744 0.1428493841 -0.0638248764 -0.0002668124 -0.0051996993 0.0044172410 0.0031579299 -0.0031137156 0.0019823284 0.0013148729 -0.0003747786 0.0018208848 0.0006228503 0.0014179728 0.0003304421 -0.0052392668 0.0017952216 -0.0015854060 0.0015687583 0.0043729437 0.0003718005 -0.0011916069 0.0013490280 0.0011238723 0.0010903832 -0.0018490670 -0.0045967454 0.0057329182 -0.0003669189 -0.0045982406 0.0056585322 0.0117370772 0.0056860346 -0.0207568004 0.0030320036 -0.0064728855 0.0031181488 -0.0189093898 -0.0079834266 0.0000602292 -0.0001571440 0.0011614322 -0.0023773875 -0.0004726458 -0.0011602938 0.0015653865 0.0039254563 0.0055417899 -0.0023304411 0.0014815366 0.0020015888 -0.0010685326 0.0005619175 0.0007432135 -0.0014218683 0.0008451669 0.0008456105 0.0063258063 -0.0000902167 -0.0047688141 0.0084635004 0.0009603375 -0.0059695795 0.0045253604 0.0011202409 0.0001886873 -0.1100742910 -0.0728484123 0.0414070492 -0.1167235931 -0.0524580472 0.0015357459 -0.1162956732 -0.0168209417 -0.0175633651 -0.0110106406 -0.0119697200 0.0082859603 -0.0935650659 -0.0141807566 0.0456811687 -0.1097615282 -0.0240429548 0.0353069581 -0.1036295474 -0.0454992356 0.0052379587 -0.1694510286 0.0089577023 0.0123311538 0.0861564112 0.0189555625 -0.0120434820 -0.1487855877 -0.0274085923 0.0215205388 -0.0987718151 -0.0019918278 0.0037533275 -0.1599077779 0.0922841408 0.0019251445 -0.1390089245 0.0851026813 0.0219837189 -0.0002077075 0.0331574318 -0.0125862698 -0.1515382624 0.0494161796 -0.0620712264 -0.1577402665 0.0813346235 -0.0704698033 -0.1504669928 0.0399832644 0.0010005474 -0.2272085118 0.0752777950 -0.0252190732 0.1271635499 -0.0609272217 0.0188567690 -0.2517990059 0.0766440463 -0.0057411523 -0.1525863037 0.0507016037 -0.0381595037 0.1147056840 0.0375917405 -0.0067555898 0.1353339520 0.0296269304 -0.0518221995 0.1684307813 -0.1129924147 0.0070476164 0.1791123988 -0.0981916688 0.0645491134 -0.0249017623 0.0011781305 0.0001507265 -0.0009092305 0.0041350258 -0.0553197391 0.0368661393 0.0225927044 0.0490706467 -0.0047369975 0.0227780738 -0.0436850993 0.0999053272 0.0085624200 0.1124176303 -0.0356530238 0.0021552405 -0.0579406697 0.0617444451 -0.0056930162 0.0239290637 0.0435029107 0.0110901388 -0.0303196622 0.0997488466 -0.0102620265 0.1064981667 0.0591112301 0.0029545557 -0.0086474050 0.0260562375 -0.0417585453 0.0537525935 -0.0298891089 -0.0306541682 0.0003927888 0.1026632321 -0.0315548544 0.0216408507 0.0897636020 -0.0261723160 0.0601514411 0.1442075907 -0.0385054124 -0.0267513250 0.1129263521 -0.0058176674 0.0526041860 0.0130124715 -0.0643405862 -0.0326996154 0.0181757586 -0.0189678440 0.0394199022 0.0509946933 -0.0668835609 -0.0868526040 -0.0094197996 0.0470175604 0.0285255903 0.0004204600 0.0015494678 0.0005245350 -0.0018735921 0.0008724090 -0.0070243807 0.0046337091 0.0078302758 0.0045816037 0.0010739105 0.0044265426 -0.0023440805 -0.0046367898 -0.0017734022 0.0048429089 -0.0088162054 -0.0264238237 -0.0185383100 -0.0131130418 0.0219314794 -0.0047332630 0.0085290899 -0.0009141440 0.0301924672 0.0206411764 -0.0200180936 0.0058126796 -0.0025308216 -0.0248598192 -0.0347868522 -0.0129514591 -0.0242344340 -0.0137635860 0.0066674069 -0.0009844568 -0.0612502940 0.0658605369 -0.0365392740 -0.0037015838 0.0271495674 0.0374225364 0.0770991636 0.0035685187 -0.0128028313 -0.0033472058 0.0315811011 0.0270787846 0.0397023818 0.0576021645 0.0270777048 0.0315620901 0.0821579859 0.0208449526 0.0404216329 0.0243600656 0.0894905609 0.0767971258 0.1240982542 0.0042917344 0.0187684643 0.0626625793 -0.0686730813 0.0135272049 -0.0085471389 -0.0304889686 -0.1202653366 -0.1159093844 0.0806432217 0.0004958905 -0.1592473932 0.0225863402 -0.0416203325 -0.0653555029 0.1081691905 -0.0136739773 -0.0538139534 0.0603026056 0.0188554647 -0.0778602137 0.0510945516 -0.0535941452 0.0493679622 -0.0286069962 0.0819172882 -0.0278031195 -0.0142468082 0.0165571053 0.0448168837 -0.0567236219 0.0332385872 -0.0005646755 0.0691551784 0.0043971999 0.1288534618 -0.1292194011 0.1196782316 0.0022649124 -0.0375395940 0.0131671754 0.1686820793 -0.1114552391 0.1111294523 -0.1340615236 -0.0416365167 -0.0189090357 -0.0818927310 -0.1214900577 0.0794622067 -0.1250310187 -0.1064252027 0.1754529661 0.0811565975 -0.0140040352 0.0189635418 0.0039033886 -0.0576193244 -0.0215299571 0.0349568807 0.0266637187 -0.0361122553 0.0526174375 0.0562788076 -0.0134064765 -0.0106374445 0.0255222435 -0.0013447577 -0.0289468933 0.0055103573 -0.0454957911 0.0308430795 0.0660914782 -0.0951616652 0.0413315799 0.1068417014 0.0004042049 -0.0608970331 0.0611689516 0.0480262412 -0.0737258004 0.0347083607 -0.0806943662 0.0099284575 -0.1046834492 -0.0099579522 0.0691991108 0.0281978009 -0.0561847031 0.0102322396 0.0939730661 -0.0599413841 0.0721121143 -0.0170496838 -0.0178567886 -0.0204988176 -0.0640614694 0.0505627968 0.0276288507 -0.0418988350 0.0390924084 -0.0200807684 -0.0266899192 0.0746586141 0.0129143684 0.0561634686 0.0011302442 0.0031782434 0.0154302718 -0.0303467662 0.0277990308 0.0061412909 0.0120238861 -0.0160232624 0.0156136925 0.0157429936 0.0060824243 -0.0379208149 -0.0845604143 0.1041920094 0.0048385514 -0.0616202472 -0.0116720482 -0.0156959617 -0.0313660768 0.0211704914 0.0164250804 -0.0621770221 -0.0085556923 0.0179575309 -0.0059671541 0.0026184443 -0.0284293680 0.0098540772 -0.0074568837 -0.0182815928 0.0034960771 0.0877989100 -0.0119857148 0.0404733657 -0.0787427362 0.0190864417 0.0667211336 -0.0135655850 -0.0289387094 0.0108312950 0.0078010162 -0.0336133805 -0.0121167142 0.1386173593 0.0144747020 -0.0664502007 0.1717065626 0.0237522636 -0.0991978933 0.0733474513 0.0460462149 0.0369003516 0.0232301585 -0.0005628880 -0.0087800484 0.0222228674 -0.0011454686 -0.0068048823 0.0171638596 0.0090677612 -0.0051569056 0.0060670311 -0.0012891308 -0.0001423000 0.0238734457 -0.0004571727 -0.0117490491 0.0231351842 0.0062653515 -0.0175569622 0.0189239528 -0.0093107849 -0.0055905059 0.0240224378 0.0091929367 -0.0119141458 -0.0151607635 -0.0035353033 0.0071032471 0.0376518469 0.0043615910 -0.0063478760 0.0222896636 0.0087202253 -0.0191919003 0.0426048553 -0.0623820944 -0.0054356392 0.0443406258 -0.0447780719 0.0063856662 0.0338169877 0.0350158698 -0.0086181285 0.0327297756 -0.0260694439 0.0293422444 0.0330774209 -0.0488023250 0.0111218758 0.0158436440 -0.1074365775 0.0120765132 0.0548759432 -0.0869519484 0.0531937256 -0.0278147657 0.0374736513 -0.0113383443 0.0175812083 -0.0717245804 0.0410084163 -0.0161216265 -0.0824394355 0.0176652993 -0.0297902703 -0.0085168059 0.0028070659 -0.0197797112 -0.0022526460 0.0093874049 -0.0593418730 0.0260723100 -0.0003278220 -0.0632166285 0.0223497205 -0.0207510551 -0.0311540658 0.0123453503 0.0092781891 -0.0178480759 0.0093263962 -0.0378640267 -0.0304875765 0.0065243357 0.0720270732 -0.0841770622 0.0355938701 0.0065555706 0.0026694639 0.0006747788 0.1245717685 -0.0987745275 0.0408009079 -0.0214541594 0.0056864763 0.0360768711 0.0508803593 -0.0381987469 0.0257981348 0.0279707009 0.0322123465 0.0310230025 0.1118773908 -0.0167300671 -0.0092726718 0.0435362584 -0.0150752994 -0.0329128591 -0.0132260124 -0.0328843205 -0.0320194672 0.0076132833 -0.0217464642 -0.0340609791 -0.0357705997 -0.0643395375 0.0186750346 -0.0222599987 0.0023935026 -0.0355100068 -0.0304965585 -0.0535034625 0.0541649150 0.0056614811 -0.0610032891 0.0085067219 -0.0447369753 -0.0721226732 0.0185870972 -0.0445824017 -0.0842260164 0.0096229303 -0.0792727182 -0.0685195960 0.0172821892 -0.0523394766 0.0164976357 0.0086538997 -0.0130613385 -0.0197048437 -0.0009737477 -0.1314640095 0.0932287646 0.0827515370 0.0214318206 0.0422691554 0.0440080634 -0.0217936808 -0.1004208823 -0.0011564698 0.0087257783 -0.2383535997 0.0146253402 0.0522609522 -0.0638158124 0.0047802771 -0.0160484773 -0.0771102994 0.0703835053 -0.0808950664 0.0455052169 -0.0521316223 -0.0001352508 0.0431975195 -0.0527982930 -0.0522265049 0.0033202587 -0.0458020784 -0.0377784332 0.0016101663 0.0042237431 -0.0470247958 0.0517994693 -0.0591560278 -0.0466183776 0.0445199912 0.0316553703 0.0384490289 -0.0135050720 -0.0032253390 0.0485287196 0.0172699809 0.0311769655 0.0330875220 0.0473057182 0.0285438521 0.0073082467 0.0537983248 0.0264045911 0.0354026460 0.0707615612 0.0166092240 0.0108325747 0.0983707140 -0.0358949852 -0.0320182830 0.0844592906 -0.0139238441 0.0076816744 -0.0983771440 -0.0678198532 -0.0900567847 -0.1205724267 0.0923641044 0.0829672400 0.1090791056 -0.0088815237 0.0464340025 0.0290691683 -0.1102424207 0.0195567742 0.0285373624 -0.0629966492 -0.0122957525 0.0766816867 -0.0355829318 0.0242511080 -0.0355776387 0.0031143833 -0.0794956107 0.0070899470 0.0121897788 -0.0076898649 -0.0154914603 0.0490494947 -0.0264375444 0.0082317229 -0.0461303717 -0.0301826081 -0.1013407001 0.0522554595 -0.1216507114 -0.0295256619 0.0400107235 0.0086656662 -0.0930215695 0.1009974471 -0.0701256106 0.1054342381 0.0149264252 0.0138025683 0.0617973494 0.0920574894 -0.0708839927 0.0890711531 0.0901476235 -0.1466003067 -0.0632256547 0.0115459951 -0.0173345220 -0.0041249630 0.0446997192 0.0265926431 -0.0216299210 -0.0220877048 0.0352785819 -0.0433263274 -0.0357263010 0.0067893046 0.0057316769 -0.0275435727 0.0044595167 0.0185434474 0.0009657789 0.0429388359 -0.0155684320 -0.0597565920 0.0869086820 -0.0237584084 -0.0730418408 0.0027616539 0.0481032311 -0.0595333810 -0.0326438037 0.0483207488 -0.0198282836 0.0659973591 -0.0050064897 0.0826742789 0.0173957353 -0.0524763121 -0.0035533365 0.0498696826 -0.0904451112 -0.0282158926 0.0715470516 0.0582113072 0.0020608294 -0.0115423978 0.0330127232 0.0584058742 -0.0402534501 -0.0232525120 0.0398310830 -0.0428743031 0.0287946736 0.0370533350 -0.0999014097 -0.0159016248 -0.0651091795 -0.0014607046 -0.0011737119 -0.0182271012 0.0364980296 -0.0331932071 -0.0064107821 -0.0136089843 0.0165730106 -0.0169879463 -0.0165044025 -0.0055502690 0.0440901529 0.0894635552 -0.1122364582 -0.0076070112 0.0641468826 0.0142239699 0.0039604495 0.0424716575 -0.0137599845 -0.0198414938 0.0646694043 0.0111509684 -0.0185077761 0.0093606585 -0.0057907356 0.0326934790 -0.0158958766 0.0057693787 0.0175188052 -0.0050615893 -0.1081655082 0.0163028030 -0.0420930685 0.0926860550 -0.0211763447 -0.0781184546 0.0130456099 0.0369797408 -0.0094004947 -0.0113367291 0.0422570037 0.0171290397 -0.1537817919 -0.0184050982 0.0742115927 -0.1865572891 -0.0300231459 0.1056301968 -0.0770923164 -0.0549117964 -0.0447415293 0.0652417114 -0.0218333868 0.0161838132 0.0466353532 0.0294307287 -0.0107235925 0.0358511595 0.0332904091 -0.0261935416 0.0232668634 -0.0423755359 0.0074404572 0.0260116017 0.0126102217 -0.0384449045 0.0332837398 0.0252377318 -0.0227394055 0.0327957321 0.0739484488 -0.0308610382 0.0372049026 0.0826806489 -0.0744797365 -0.0243653945 -0.0247607030 0.0243493700 0.0169589898 0.0602910021 -0.0582753934 -0.0009476314 0.0670489054 -0.0348325252 0.0281504733 -0.0402943889 0.0058804386 0.0283593065 -0.0301351428 0.0091185614 0.0317024586 0.0333745003 -0.0100912085 0.0224635782 -0.0232840389 0.0273751263 0.0259302956 -0.0327277618 0.0159318023 0.0002313937 -0.0796848498 0.0236186954 0.0229595048 -0.0710322988 0.0449632044 -0.0178556481 0.0275864065 -0.0144061974 0.0040204323 -0.0706239591 0.0414059134 -0.0111328677 -0.0645701956 0.0271049324 -0.0655354839 -0.0081387305 0.0147017527 -0.0313864086 0.0035229123 0.0224232550 -0.0482132171 0.0207840740 -0.0035265209 -0.0374813343 0.0081911360 -0.0143149159 -0.0402718253 0.0304760145 -0.0140506602 -0.0223565814 0.0280344289 -0.0312557713 -0.0450154674 0.0075552730 0.0881229113 -0.1019779583 0.0272328504 0.0229879293 -0.0166302059 0.0039009751 0.1757046760 -0.1054258793 0.0317238095 0.0133226924 0.0069987719 0.0450689834 0.0701174381 -0.0684129229 0.0191872620 0.0262432284 0.0566226248 0.0353428164 0.1383218549 -0.0521707637 -0.0255509415 0.0261137065 -0.0350106613 -0.0171367537 0.0376330916 -0.0366099477 -0.0158190708 0.0138916659 0.0014181122 -0.0336525460 -0.0687680393 -0.0541075587 0.0056154512 -0.0224863032 0.0551031548 -0.0387460065 -0.1312163031 -0.0274586788 0.0323607648 -0.0301821537 -0.0263348023 0.0057526706 -0.0824394737 -0.0874286385 0.0085084633 -0.0025923296 0.0023319763 0.0025402920 -0.1715240069 -0.0981281390 0.0066493389 0.0173613066 -0.0125682695 0.0004991455 0.0252933186 0.0198825295 0.0159647318 0.1448440943 -0.0894276874 -0.0614269168 0.0028625922 -0.0503805168 -0.0357374296 0.0188869274 0.1045317312 0.0104743643 -0.0071027439 0.2230167157 -0.0356583929 -0.0762846947 0.0708944891 0.0321403075 -0.0010764218 0.0926240856 -0.0580631555 0.1024684912 -0.0524245007 0.0421561340 -0.1088208569 -0.0171203932 0.0025188267 0.0344182803 -0.0065457758 0.0000408241 0.0379267188 0.0731979652 0.0005001161 0.0728128398 0.0266666588 -0.0015128035 -0.0560321827 0.0506311780 0.0385439471 -0.0069966283 0.0307300230 0.0017012520 -0.0041277203 0.0067556178 0.0141085206 0.0306594192 0.0500064245 0.0573017239 -0.0652195913 0.0421283879 0.0042736259 0.1136268398 0.0266447806 0.0362015279 0.0680108149 -0.0210394259 -0.0810329224 -0.0297641209 0.0170728759 -0.0306703620 0.0180948921 0.0038444455 -0.0001364978 -0.0449018326 -0.0324936365 0.0013240885 0.0236670072 0.0017896931 -0.0125987939 0.0036241068 0.0063264805 -0.0199738866 0.0135934076 -0.0009903092 -0.0064796923 0.0045430488 -0.0007176158 0.0042261087 -0.0126404969 0.0016942988 -0.0039788995 -0.0074269470 -0.0090111638 0.0037731913 0.0006840532 0.0022562129 0.0037209096 -0.0003288682 -0.0030611637 0.0089301586 -0.0144228127 0.0090913165 -0.0240103783 -0.0073112817 -0.0091891729 0.0036098028 0.0053017126 0.0189657558 0.0029142829 0.0118803837 0.0024374520 -0.0078253949 -0.0037682285 0.0033493405 0.0004988809 -0.0059105862 0.0004567596 0.0071352282 -0.0101001110 0.0004239506 -0.0046303358 -0.0008888182 0.0008204991 0.0004737903 0.0047588457 0.0009467496 -0.0013369725 0.0036755266 -0.0029415364 -0.0007805307 0.0003156361 -0.0018419046 -0.0013403093 0.0010563780 -0.0003625417 0.0023797608 0.0038875318 -0.0023214364 0.0006916286 0.0062481898 -0.0043794330 0.0033665986 -0.0000049780 -0.0019411305 0.0005448354 -0.0021087450 -0.0038123163 0.0065858971 0.0026777190 0.0017713864 0.0028207494 0.0042036378 0.0032342675 0.0050483070 0.0106656787 -0.0173509923 -0.0011129841 0.0203143752 0.0447795778 0.0739283134 -0.0242608287 0.0143667711 0.0051481629 0.0016254999 -0.0019610106 0.0051040681 -0.0094748549 0.0088871403 0.0137662959 -0.0338076223 -0.0043078892 -0.0172721289 -0.0000903874 -0.0005305431 -0.0068786286 0.0102116780 -0.0086360538 -0.0022988596 -0.0032967183 0.0040485709 -0.0045200330 -0.0040085827 -0.0013591688 0.0114733350 0.0183816995 -0.0246651753 -0.0028266389 0.0133953065 0.0031747332 -0.0038507697 0.0130242134 -0.0024421084 -0.0072151642 0.0110089040 0.0026161555 -0.0103698220 0.0051083335 0.0001423774 0.0091633958 -0.0031294024 0.0027250780 0.0080804811 0.0002782351 -0.0308816000 0.0042681509 -0.0145451647 0.0237116499 -0.0052919539 -0.0212560473 0.0038140291 0.0095163600 -0.0037981714 -0.0050550477 0.0123346799 0.0055249080 -0.0356734727 -0.0052603670 0.0188273727 -0.0411331693 -0.0093584936 0.0225756633 -0.0162149496 -0.0143075314 -0.0116264738 -0.0737012537 0.1356004225 -0.0421820891 -0.0186877873 0.0139580146 0.0485353665 0.0246492066 -0.0756246015 0.0851354350 -0.0336211160 0.0881856122 -0.0235564022 0.0149712953 -0.0290086301 0.0672626156 0.0100268595 -0.0074990782 0.0623096945 0.0166414167 -0.0680415726 0.0902162461 0.0733282838 -0.2053694631 0.1590995073 -0.0143391433 0.0328912948 -0.0703865020 0.0564497006 -0.1459458802 0.1270430359 0.0680709788 -0.1227996917 0.1281963252 -0.0135042883 0.0005855096 0.0251755512 -0.0282122693 -0.0175842590 0.0307800168 0.0384577217 0.0611345202 -0.0220225931 -0.0257745584 -0.0146835920 0.0246709879 -0.0213204932 -0.0019355146 0.0243636011 -0.0591011934 -0.0602404940 0.0538887510 -0.0869299454 -0.0909476838 0.0646198380 0.0211171829 0.0149751229 -0.0299443979 -0.0810625680 -0.0868257099 0.0625182394 -0.0729743340 -0.0706821730 0.0632332987 0.0927504542 0.0022721846 -0.0454667938 -0.0639832305 -0.0365121628 -0.0128974147 -0.0267333613 -0.0024902652 -0.0131411458 0.0306178670 -0.0338791903 0.0011488010 0.0528295740 -0.0171086555 0.1186653134 0.0906099603 -0.0222458647 0.1217933671 -0.0702052144 0.0215803625 -0.1265221650 0.0450982322 0.0024496528 0.0673496874 -0.2097697346 0.0488265363 -0.4043045337 0.0218735717 -0.0039876240 0.0427968038 -0.0615521737 0.0090892343 -0.1341793375 0.0463430690 0.0006694964 0.0319427098 -0.2311612862 0.0378103615 -0.3634646124 0.0151534367 -0.0013633071 -0.0249179236 0.0192833539 -0.0403338335 -0.0125011230 -0.0500093524 -0.0424012166 0.0184237529 0.0010363276 -0.0526589429 -0.0052567198 -0.0449543816 0.0019789579 0.0149738353 0.0201371513 -0.0537473795 -0.0081330682 -0.0330690705 0.0541903405 0.0631632781 -0.0775750667 -0.0104623723 -0.0311132737 -0.0581203347 0.0027560422 -0.0698339817 -0.0914597527 -0.0101203210 -0.0652400836 -0.0377538167 0.0210851893 -0.1274186152 0.0020984716 0.0067112259 0.0129332535 0.0041980675 0.0135377338 0.0319599458 -0.0095392363 0.0062936245 0.0184667277 -0.0126278574 0.0001707233 0.0014988586 0.0186906097 0.0088673143 -0.0053491657 0.0161176041 0.0024851747 -0.0109988741 0.0253864349 0.0131985412 -0.0116456392 0.0148451198 0.0037550558 -0.0025447685 -0.0139888451 0.0353875633 -0.0426146452 0.0108115046 0.0110701999 0.1010158247 0.0183463380 0.0126943949 0.0121500302 -0.0666672481 0.0121509165 -0.0006314118 -0.0740697826 0.0405978464 -0.0002010985 0.0112433847 0.0101991775 -0.0899850511 -0.0776559119 0.0236789899 0.1052035365 0.0002011478 0.0090869148 0.0319592470 0.0565167565 0.0300040945 -0.1104838413 -0.0058547924 0.0086506370 0.0468876060 0.0542379449 -0.1320997845 -0.0843511749 -0.0685422737 0.0244138431 0.0656462540 -0.0016636333 0.0377139102 0.0022000665 -0.0515024623 -0.0340067073 0.0702854587 0.0379630670 -0.0092886337 0.0203606972 -0.0181956598 -0.0211020946 0.0161411734 0.0001017870 0.0007293604 0.0005031404 -0.0070671348 0.0001985133 0.0009398608 -0.0096891046 0.0081838376 -0.0086077119 0.0032557950 -0.0076309156 0.0089917102 -0.0086173965 -0.0038371874 -0.0021441934 0.0080793490 -0.0081620137 -0.0004364144 -0.0032757620 0.0145860025 -0.0054086040 0.0193687239 -0.0290028987 0.0162330236 -0.0054762594 -0.0065526606 0.0015600306 0.0313694134 -0.0179882449 0.0145733357 -0.0180876062 -0.0174505836 0.0105743529 -0.0157475195 -0.0057723394 0.0070771616 -0.0235575175 0.0001123152 0.0183696503 0.0031193854 0.0118975426 -0.0009335586 -0.0043809481 0.0011016224 -0.0043862038 0.0086884351 0.0001661623 -0.0050790315 0.0053817624 0.0098189967 -0.0004655199 0.0040598836 -0.0016349139 0.0030848202 0.0000800004 -0.0020091201 -0.0066912889 0.0176363004 -0.0074927449 -0.0094925101 0.0099111171 0.0054414084 0.0036078112 0.0079964891 -0.0119604244 0.0127950943 0.0003453481 -0.0076152440 -0.0098929577 -0.0090618777 -0.0009200657 -0.0037799802 0.0136541941 0.0058848618 -0.0156132480 0.0173153215 0.0039307394 -0.0138801458 0.0837687002 0.0949927385 -0.0124320376 -0.0171243385 -0.0092412575 0.0005445120 0.0038273798 -0.0058267248 0.0128302400 -0.0104539942 -0.0151276691 0.0421634750 0.0058924890 0.0216254977 -0.0003274381 0.0005398982 0.0074620049 -0.0116469489 0.0104169843 0.0023597192 0.0037380257 -0.0046601510 0.0058635774 0.0047260867 0.0029192304 -0.0128020196 -0.0225081881 0.0304236215 0.0034401858 -0.0174674101 -0.0009614742 0.0084866091 -0.0134424395 0.0001209127 0.0077883173 -0.0140451502 -0.0007479043 0.0054879694 -0.0074463464 -0.0013316410 -0.0148328874 0.0059692524 -0.0036790964 -0.0056948093 0.0008554996 0.0352072412 -0.0055405891 0.0115444331 -0.0318095471 0.0072115507 0.0272577918 -0.0037046107 -0.0132952761 0.0028582002 0.0058531573 -0.0160605404 -0.0077009438 0.0427206023 0.0061165319 -0.0240635563 0.0498513552 0.0115809447 -0.0282047416 0.0207932452 0.0165100893 0.0122810075 0.0073152701 0.0341652557 -0.0079506221 0.0209773742 0.0168791049 0.0089308540 0.0276338283 -0.0030244708 0.0132722943 0.0013326236 0.0118390483 -0.0040995144 0.0191840976 -0.0022776880 0.0049973460 0.0178025222 0.0129393786 0.0061566196 0.0284554036 0.0115489379 0.0139470979 0.0444921494 -0.0221697347 0.0145843654 -0.0148318799 -0.0000047601 -0.0097431524 0.0312601712 -0.0195698357 0.0170828937 0.0183473685 -0.0005863532 0.0188241850 0.0075993377 0.0028862648 0.0535306863 -0.0249018099 -0.0376562870 0.0487356135 0.0544316050 0.0750055510 -0.0282813337 -0.0088115241 -0.0291901904 0.0486034518 -0.0025073588 -0.0092270822 0.0610684038 -0.0563588444 -0.0666051592 0.0927103119 -0.1051787079 -0.1386588536 0.0965727958 0.0128317332 0.0249154058 -0.0543401531 -0.0624926885 -0.1350117595 0.0884818691 -0.0634826494 -0.0999772390 0.1162228682 -0.0044693081 -0.0045924051 -0.0073321676 -0.0345842735 -0.0098135839 0.0076229681 -0.0723484033 0.0182893534 -0.0252279284 0.0319064049 -0.0412228892 -0.0092897647 0.0264194738 -0.0324073592 -0.0259508056 -0.0576767265 -0.0073055223 -0.0399707340 0.0904772390 -0.0348629425 0.0014817833 0.0507745540 -0.0349405460 -0.0891722862 0.1264955635 -0.0432263282 0.0607545068 0.0442410250 -0.0173660898 -0.1274771078 0.0064120749 -0.0552961634 0.0287084709 0.0298526194 -0.0274533765 -0.0015076318 0.0582550417 -0.0627010022 0.0904976437 0.0438215616 0.0270980284 0.0593568697 -0.1016058298 0.0122617424 0.1478722373 -0.0483276726 0.0082137314 0.1004389046 0.0645453823 -0.0074770306 -0.1414554106 -0.0305755826 0.0061342959 0.0157313446 0.2309154431 -0.0277607855 -0.3829992286 0.0135831273 -0.0080572387 -0.0704620406 0.0848972019 0.0014030806 -0.1435365951 -0.0571738177 0.0094707125 0.0947186567 0.2394679902 -0.0114431217 -0.4256556959 -0.0574997640 -0.0019755092 0.1061869804 -0.0002102063 -0.0089679574 -0.0158958549 -0.0040955990 -0.0179785692 -0.0439026742 0.0168914117 -0.0063838427 -0.0220758873 0.0187983233 -0.0001594364 -0.0011156895 -0.0277967065 -0.0069716228 0.0036093190 -0.0374684253 0.0091030167 0.0209889897 -0.0282106181 -0.0216961719 0.0123349041 -0.0241789000 0.0045108552 -0.0120182612 -0.0042655593 0.0152365457 0.0154164582 -0.0157075814 0.0173202792 0.0193548881 -0.0012189510 0.0148528506 0.0067047725 -0.0228458777 0.0011393201 -0.0096718719 -0.0175840745 0.0209566611 0.0325383454 -0.0131458422 -0.0027435141 -0.0003837339 -0.0101118411 0.0016092440 -0.0005222094 0.0018365101 -0.0033681246 -0.0008991783 -0.0020340223 -0.0046567438 0.0029606095 -0.0011363596 -0.0021716889 -0.0125965261 -0.0094111117 -0.0076748626 -0.0085199230 -0.0173486958 0.0292223220 0.0324294497 -0.0132288037 0.0000898545 -0.0088954238 0.0254146284 0.0031203938 0.0219951076 0.0194754769 -0.0117666405 -0.0299223778 -0.0815715806 -0.0459967973 -0.0516852862 -0.0622165266 0.0965491822 -0.0033483284 -0.0613061416 0.0634753047 0.0193035356 -0.1012943618 0.0629953955 -0.0867468619 0.0622480830 -0.0374192512 0.0765965858 -0.0337468695 -0.0200530799 0.0178767515 0.0450124421 -0.0660966210 0.0373862269 -0.0185690796 0.0821640226 -0.0152751103 0.1763775868 -0.1822746696 0.1307551960 0.0186457421 -0.0615359814 0.0208352021 0.2107713864 -0.1389455400 0.1421463606 -0.0833503821 -0.0484221311 -0.0323951636 -0.0293020744 -0.0796517858 0.0504759079 -0.0692111643 -0.0381685054 0.0884698302 0.0648462866 -0.0471487163 0.0234620059 0.0179922022 -0.0520942016 -0.0084214623 0.0118757809 0.0132784448 -0.0154887134 0.0256121302 0.0256819372 -0.0082006028 -0.0151161894 0.0281993271 -0.0070177969 -0.0273330568 0.0159537009 -0.0240720524 -0.0074840034 0.0578691498 -0.0533645840 -0.0015352362 0.0722175808 -0.0120614718 -0.0622066635 0.0775378543 0.0093760562 -0.0692646962 0.0624278024 -0.0450169460 0.0355956911 -0.0918999676 0.0010469474 0.0600371349 0.0306724061 -0.0052210191 0.0545636701 0.0277682082 0.0018191482 0.0036211013 -0.0012677340 -0.0004788916 0.1050618183 0.0011868408 0.0552927456 0.0014149765 0.0110937420 -0.0507701273 0.0570336703 0.0977712726 -0.2330758273 -0.0267659434 -0.1088232651 0.0024082697 0.0017387141 -0.0488351247 0.0618253923 -0.0524508882 -0.0188524287 -0.0202757277 0.0264136150 -0.0305686950 -0.0263309788 -0.0077940933 0.0652943425 0.0901540338 -0.1274925489 -0.0198752048 0.0675672598 -0.0025631311 -0.0650782337 0.0651376830 0.0134739569 -0.0509071590 0.0489726261 0.0017330423 -0.0464059844 0.0584866204 -0.0052905254 0.0519813385 -0.0256112307 0.0277606428 0.0408909167 0.0003641546 -0.1741436847 0.0183434166 -0.0863082519 0.1498514094 -0.0353616881 -0.1352314788 0.0251992463 0.0560043292 -0.0252093730 -0.0300224746 0.0761109844 0.0340274778 -0.1905185881 -0.0322768012 0.1092496304 -0.2138030018 -0.0620129366 0.1152844755 -0.0815458320 -0.0825111190 -0.0669702856 -0.0061653134 -0.0052788563 -0.0060163208 -0.0053459919 -0.0105968696 -0.0055248445 -0.0069907184 -0.0000071669 -0.0006538288 -0.0023890450 0.0066090789 0.0001866215 -0.0011701288 -0.0001670489 0.0022863814 -0.0039636563 -0.0051600145 -0.0063027078 -0.0052913803 -0.0220131138 -0.0019217746 -0.0070029718 -0.0086203505 0.0079074733 0.0044893260 0.0041927583 0.0018059219 0.0046892091 -0.0031469522 0.0060391890 0.0024001912 -0.0078268359 -0.0094443989 0.0020950846 -0.0044027408 0.0005008126 0.0049485070 0.0004160508 -0.0011652366 0.0034952890 0.0031521052 -0.0011746996 0.0013138821 -0.0029014687 0.0023342574 0.0031644745 -0.0018469970 0.0001604621 -0.0021323837 -0.0109487188 0.0032332339 0.0034788578 -0.0037334310 0.0018362200 -0.0022554930 0.0015308511 -0.0006090534 -0.0019248916 -0.0073325592 0.0044531707 0.0016304762 -0.0027180850 0.0001158123 0.0003508949 -0.0013568233 0.0003914778 0.0094374654 0.0019010599 -0.0024139493 -0.0024689098 0.0019696170 -0.0003898073 -0.0030070715 -0.0002077978 -0.0006044045 0.0019241061 -0.0104164369 -0.0172289718 -0.0234948865 -0.0049389594 -0.0275992240 0.0372717160 -0.0104885300 0.0085370488 0.0172315692 -0.0075374394 -0.0352154853 0.0665512147 -0.0170053961 0.0493969850 0.0172436020 -0.0040462958 -0.0413073214 0.0100953065 -0.0191516512 0.0144265819 0.0136980379 -0.0056275870 -0.0077119648 0.0381712297 -0.0233766315 0.0564625546 0.0225207440 0.0122408315 0.0197247796 -0.0077523793 0.0039777561 0.0050260842 0.0048888171 0.0036033144 0.0061434730 0.0027078771 0.0081333809 -0.0045754371 0.0038929210 0.0033009982 0.0013315298 0.0096660755 0.0069699261 -0.0129589360 0.0019060485 -0.0050700988 -0.0061774741 0.0146434525 0.0016443392 0.0006866389 0.0102072963 0.0027816437 0.0119281035 0.0202757536 0.0013388401 -0.0093597130 0.0104537511 -0.0005696032 0.0149610722 0.0330603808 0.0709895542 0.1069079962 0.0247917883 0.1193370723 0.1768671368 -0.0097106318 0.1266081749 0.1840919786 -0.0709694443 0.0472652357 -0.0016689829 0.0826643482 0.0708350246 -0.0474234245 -0.0502741973 0.0615344179 -0.0284350350 0.1792628482 0.0888063366 -0.1114841064 0.0478775693 0.0838939680 -0.1395068107 0.0083758344 -0.0651607126 -0.0359964572 0.1206682973 -0.0472943746 -0.0167461117 0.0327712476 -0.0276683487 -0.0289830020 0.0183992559 -0.0070120290 0.0602389694 -0.0543125649 -0.0443416775 -0.1230192919 0.1288126297 -0.0070393281 -0.0335658748 0.0564834637 -0.0172676731 0.0500166120 -0.0306467874 0.0370355276 -0.0075379363 -0.0027406590 -0.0014549209 -0.0095020498 -0.0670822004 0.0347964078 0.0659244580 0.1515339100 -0.0692263425 -0.0211277109 -0.0821375416 -0.1081099208 -0.1153827412 0.0499345460 0.1451296756 -0.0114559557 -0.1631790167 -0.0358292646 0.0873423811 0.0944208687 -0.0458899509 0.1739010487 -0.0614197869 -0.1967839148 0.1044349431 -0.0564415284 -0.0359795255 0.0378195207 -0.0733598624 -0.0173502757 0.0262103486 -0.0228184083 0.0449235665 -0.1113913005 0.0298225113 -0.0695265904 0.0109653337 -0.0765670070 -0.0312930153 0.0158846727 0.0740281063 -0.0362323543 0.0016221344 0.0128581646 0.0984218678 -0.0851135227 0.1038806556 -0.2678294764 0.0127854675 -0.0680793223 -0.0405832205 0.0625140992 0.2414305444 -0.0507794733 0.1244210049 -0.0586643530 -0.1345444816 0.0239278128 -0.0525375161 -0.0132445860 -0.0212068684 -0.1034847181 0.0553803960 -0.0034166416 0.0081306852 0.0238302712 -0.0176701356 -0.0092496264 0.0058073367 0.0211156338 0.0305915494 0.0106376699 -0.0030569470 0.0040740949 0.0245154123 0.0054720809 -0.0009815462 -0.0072864010 0.0222361268 0.0043827287 0.0064182347 -0.0017361393 0.0448376846 -0.0089531864 0.0026385736 0.0277261190 0.0187919633 0.0300778032 0.0113287670 -0.0292421116 0.0351640810 -0.0038911237 -0.0127064101 -0.0225187722 -0.0161318016 -0.0011077053 0.0231401217 0.0698720334 0.0806267929 0.0098465622 0.0060621123 0.0225528637 0.0691220179 -0.0594236815 -0.0450858152 0.0373348244 -0.0112770663 -0.0013841518 -0.0075570012 0.0015555572 0.0022281118 0.0090920489 -0.0102423341 -0.0109602121 0.0374327050 0.0043772707 0.0120875262 0.0003401118 0.0015039153 0.0022319556 -0.0095951582 0.0051706020 0.0014214879 0.0008114837 -0.0017726307 0.0031349332 0.0019733039 0.0036696966 -0.0027858915 -0.0081455664 0.0124862025 0.0039697030 -0.0069413912 -0.0062948773 -0.0017313455 -0.0158903734 0.0103090519 0.0020298219 -0.0067592563 -0.0047529895 0.0148555772 -0.0030039954 -0.0105358026 -0.0172246285 0.0006249021 -0.0044564440 -0.0096372209 -0.0029450801 0.0305989318 -0.0063303070 0.0093212891 -0.0192609526 0.0032518328 0.0195717565 -0.0025793141 -0.0096181011 0.0042036349 0.0089171489 -0.0143677475 -0.0078418806 0.0168674716 0.0042851750 -0.0132658533 0.0201093472 0.0095428713 -0.0110637964 0.0098763570 0.0076960428 0.0044277870 0.0448077986 -0.0590950995 0.0656471089 0.0173334616 0.0320804074 0.0100964824 0.0011889408 0.0472667393 -0.0438172711 0.0243127769 -0.0696723983 0.0135461612 -0.0248213601 0.0179810297 -0.0280071117 -0.0128732587 0.0274033677 0.0127567271 0.0117509738 0.1218577298 -0.0203875601 -0.0054154885 0.1276111064 -0.1106816129 0.0102266515 -0.0291720766 0.0221299809 -0.0874328168 0.0922844705 -0.0832254207 -0.0794686886 0.1184219936 -0.0208893388 -0.0120799042 0.0315002481 -0.0038070992 -0.0024955960 0.0368406473 -0.0238261951 -0.0429065309 -0.0556702271 0.0173648760 0.0122610464 0.0263771836 -0.0261902156 0.0019168887 0.0206594018 -0.0042024546 0.0331412408 0.1159282202 -0.0341635020 0.0354143147 0.1154248405 -0.0751606203 -0.0069302470 -0.0253086634 0.0205411569 0.0732280178 0.1015807309 -0.0668980820 0.0696571576 0.0909088291 -0.0363402217 -0.0282106887 0.0081068182 0.0119766251 0.0109636538 0.0184844322 0.0066557827 0.0345197749 -0.0056488508 0.0062582460 0.0079190981 0.0115733963 0.0079133605 -0.0022834294 0.0555320202 -0.0086814205 0.0525956692 0.0377710834 0.0755405996 -0.0739539598 0.0324514342 -0.0248271328 -0.0121037136 -0.0131451715 0.0851248756 -0.1518665799 0.0508055760 -0.0673079378 0.0052397874 -0.0332148110 0.1433469527 0.0012033726 0.0338821668 -0.0209949568 -0.0410202739 -0.0102566672 -0.0164957100 -0.0205073620 0.0349011464 -0.1187486219 -0.0807888005 -0.0440359609 -0.1101037852 0.0346490459 0.0121402832 0.0010013433 -0.0082705692 0.0235400876 -0.0646915588 -0.0249487010 -0.0276088559 0.0196356536 -0.0066808485 -0.0355645256 -0.0332564420 -0.0872336368 -0.0192188006 0.0382539673 0.0179109278 -0.0075438188 -0.0363754427 -0.0480957795 0.0044819846 -0.0127518717 -0.0666598486 -0.0300351366 -0.0277379305 -0.0471542494 0.0035150337 0.0632179393 -0.0904843774 -0.0238621640 0.0103189846 0.0014260566 -0.0163216303 -0.0154631931 0.0047662396 -0.0270030457 -0.0260793866 0.0046214707 -0.0307009095 -0.0313573794 0.0192905563 -0.0130219081 0.0052282215 -0.0214116563 0.0140021779 -0.0106212392 -0.0412427654 0.0693111324 0.0468795298 0.0033206073 -0.0493907402 0.0121173081 -0.0308642861 0.0305429719 -0.0620881267 0.0019419723 -0.0754393661 -0.0614331805 0.0882880018 -0.0786685963 -0.0537766841 0.0118419690 -0.0630430869 -0.0324566112 0.0463439190 -0.0157041407 -0.0004776755 0.0299966926 -0.0825316676 -0.1366441678 -0.0290488647 -0.0534447915 -0.1223585206 -0.0365047130 -0.0015936159 0.0101097011 -0.0299298768 -0.0366495446 -0.0306354782 -0.0147132121 -0.0542805694 -0.0682031920 -0.0952163348 -0.0287305103 -0.0460659585 -0.0774136147 -0.0173932623 -0.0375511579 0.1002474135 -0.0526156558 -0.0512559784 0.0029325305 0.0037300593 0.1071659644 -0.0717741292 0.0807579549 -0.0565675345 0.0834112549 0.0472698140 -0.0244659945 0.0164679860 0.2066956088 -0.0812192030 0.0430458248 0.0949311601 -0.1072909109 0.0359606143 0.0441411168 -0.0739858750 -0.0818934193 0.0369583626 0.1026212607 0.0071231878 0.0104479463 0.0710465637 0.0701023823 0.0202789943 -0.0501746847 -0.0115178028 -0.0361052645 0.0129254003 -0.0942694752 -0.0383620470 0.0831251841 0.0884344659 0.1248261749 0.1775479611 0.0949303415 0.0015751203 -0.0782674447 -0.0512683950 -0.1500664603 -0.0479857248 -0.0030754683 0.1120346324 0.0516910187 0.0087093037 -0.0077661076 0.1141786195 0.0431861820 -0.0693191324 0.1283316852 0.0054468397 0.0166132050 0.0539473475 -0.0051571621 -0.0206226431 -0.0851695405 -0.0257313384 -0.0219935157 -0.0175812882 0.0399036457 0.0086217849 -0.0226666702 0.0288048485 0.0057849205 -0.0374840059 -0.0253301940 -0.0302453527 -0.0319347034 0.0009599475 -0.0199655627 -0.0730511969 0.0104611333 -0.0141406367 -0.0696738849 0.0037237565 0.0097575404 0.0096700961 -0.0053962689 -0.0100267219 0.0014849157 -0.0121191857 -0.0142183159 -0.0869215585 -0.0244705300 -0.1043589185 -0.1345353662 0.0310453961 0.0264193769 -0.2109905576 -0.0332195273 -0.0215898467 0.0419232265 0.0129035897 -0.0146432158 0.0340009291 0.0035998385 -0.0125268412 -0.0032351088 0.0167146931 0.0157346749 -0.0456938290 -0.0009775678 -0.0107321956 0.0015546362 0.0006090722 -0.0054350662 0.0085885495 -0.0049091444 -0.0032202082 -0.0015157073 0.0035073105 -0.0039229162 -0.0029973842 -0.0051236494 -0.0039462194 -0.0055916262 0.0022379981 -0.0056868559 -0.0043537435 -0.0041362007 -0.0161753082 0.0080572024 -0.0011921100 -0.0048876879 -0.0080608359 -0.0014167755 -0.0148422459 0.0178505521 -0.0073903624 0.0033039332 -0.0106487296 0.0104847288 0.0028249505 0.0006823875 -0.0121961532 -0.0009287086 -0.0113217074 0.0189243423 -0.0041050877 -0.0181105566 0.0041691529 0.0066927312 -0.0046841348 -0.0055030699 0.0114217587 0.0056466278 0.0027066280 -0.0041387802 0.0039115912 0.0041063369 -0.0101058533 -0.0054369538 -0.0005436573 -0.0023366270 -0.0002364614 0.0291564645 -0.0293780977 0.0502979535 0.0130818909 0.0259951053 0.0215352371 0.0064707811 0.0237449026 -0.0227501911 0.0169418130 -0.0453831692 0.0062803412 -0.0137470763 0.0123398102 -0.0160001672 0.0004722816 0.0231665485 0.0247485765 0.0146897849 0.0887937216 0.0030217189 0.0087904488 0.0727320563 -0.0694664483 0.0029558661 -0.0224022897 0.0047080269 -0.0596563534 0.0527575126 -0.0514182073 -0.0406043095 0.0712304261 0.0132149304 -0.0019999129 0.0265907198 0.0244088213 -0.0020089503 0.0230757072 -0.0063255452 -0.0281527934 -0.0368943004 0.0112257805 0.0084876557 0.0151835124 -0.0059265366 0.0001136641 0.0248574121 0.0252756604 0.0222116398 0.0882803872 0.0073299067 0.0163125650 0.0775331578 -0.0462751001 -0.0045525510 -0.0217877297 -0.0066240384 0.0547910185 0.0522423359 -0.0347293956 0.0474526188 0.0643028495 0.0130606570 -0.0094729050 0.0066092634 0.0004004943 -0.0077099416 0.0084226785 0.0033286485 -0.0024165868 0.0083395819 -0.0090487426 0.0252887271 -0.0064018268 -0.0001041615 0.0023671032 0.0320982685 0.0533819768 0.0763636558 0.0181630322 0.0716740298 -0.1045000552 0.0278899974 -0.0111239183 -0.0599388689 0.0207554496 0.0965481191 -0.1915572053 0.0474999472 -0.1263858701 -0.0727529771 0.0097121925 0.0970235458 -0.0085986210 0.0616263485 -0.0338933695 -0.0360013967 0.0136789930 0.0183441996 -0.0864326998 0.0742088646 -0.1463005697 -0.0629634309 -0.0513232478 -0.0727272117 -0.0624954485 0.0351267297 0.0802742730 -0.0073478158 0.0289069302 0.0573138925 0.0307061660 0.0418407164 -0.0419010114 0.0286592536 -0.0041203910 0.0170144717 0.1087804666 0.0319975002 -0.1664705438 0.0413001415 -0.0577486597 -0.0704749728 0.0911305635 -0.0072787283 -0.0283691450 0.0388181454 -0.0058348850 0.0846104324 0.1890650059 -0.0145224174 -0.1581195976 0.0477888476 -0.0162834437 0.0796505899 0.0144299750 0.0305427004 0.0277547618 -0.0033817199 0.0413887130 -0.0013769942 0.0363971173 0.0786563826 0.0641294672 -0.0036994691 0.0392561746 -0.0060598658 -0.0085747207 -0.0030990757 -0.0006692892 -0.0657603944 -0.0272049864 -0.0120526346 0.0212335891 0.0314494186 -0.0375529964 -0.0108350700 0.0092121336 -0.0261856695 0.0028759526 -0.0289930270 -0.0272016113 0.0160336088 -0.0350813434 -0.0547889798 0.0020059113 -0.0337755934 -0.0096171079 0.0131495542 -0.0085165235 -0.0166062641 0.0540413057 -0.0556645484 0.0059555169 -0.0656792110 -0.0439461290 -0.1267031482 -0.0606390032 0.0034149411 -0.0243121933 -0.0154632134 -0.0538631607 -0.0380482061 -0.0280508171 -0.0638465983 -0.0327800866 -0.0684029816 -0.0452039677 -0.0795798722 -0.1424780797 0.0739139698 -0.0633513694 0.0509482105 -0.0570551554 0.0492359024 0.0179915024 -0.0502739995 0.0810327175 -0.0117839542 0.0479259011 -0.0946494735 0.0435206939 0.1012470698 -0.1081704674 -0.0314776592 -0.2153363370 0.0156914823 -0.0339493374 -0.0479935155 0.1117999455 -0.0548555152 -0.0260157039 0.0984709384 0.0487525074 -0.0422985976 -0.1338562827 -0.0065929935 -0.0048378379 -0.0252523113 -0.1008592430 -0.0615759368 0.0478918639 -0.0012831629 -0.0032501222 -0.0196665316 0.1060276952 0.0810248478 -0.0686645932 -0.0767774055 -0.1596136406 -0.1346405111 -0.1038748340 -0.0592753800 0.0593603325 0.0782842279 0.1096280639 0.0717253094 -0.0189975268 -0.1526814959 -0.0647463016 -0.0219672068 0.0056005642 -0.1282949790 -0.0667619326 0.0758698897 -0.1293359254 0.0099003956 -0.0335369885 -0.0591234991 0.0087082577 0.0134255757 0.0993346338 0.0341205600 0.0291567471 0.0156252376 -0.0356698131 -0.0162720058 0.0273869230 -0.0377934974 -0.0016698240 0.0426980697 0.0259963472 0.0372533485 0.0314233352 -0.0113823727 0.0498368579 0.0694862768 -0.0309366034 0.0384265646 0.0638601680 -0.0349497393 0.0264076120 -0.0114491864 -0.0133883975 0.0307111032 -0.0160624493 0.0110632318 0.0105176525 0.1002360157 0.0639024012 0.1318113492 0.1229627560 0.0351672424 0.0634281939 0.1768310655 -0.0596944033 -0.0710797228 0.0574331133 -0.0103327240 0.0214172490 -0.0449501989 -0.0061542353 0.0149841045 -0.0009400878 -0.0190247610 -0.0187194839 0.0456768442 0.0028233827 0.0106861149 -0.0011611386 -0.0002652205 0.0036821411 -0.0076831616 0.0022914542 0.0025683022 0.0015056330 -0.0024853503 0.0031786524 0.0020264822 0.0029184241 0.0057347015 0.0107783668 -0.0093582535 0.0062834161 0.0101276904 0.0019215579 0.0136300452 -0.0096177782 0.0038212849 0.0030861287 0.0117560980 -0.0008495336 0.0180756371 -0.0140434372 -0.0035623240 -0.0037695457 -0.0006392164 -0.0091919084 -0.0056117451 -0.0013859164 0.0172879327 -0.0017648931 0.0099175215 -0.0131116765 0.0026798979 0.0153030253 -0.0044543636 -0.0042277979 0.0068446999 0.0080310390 -0.0102275196 -0.0054007392 -0.0112341718 0.0042643609 0.0021625179 -0.0140934000 0.0105567050 0.0128573460 -0.0050360465 0.0007959858 0.0011827326 -0.0203668359 0.0625547968 -0.0282865256 -0.0010230087 0.0194145956 0.0110092120 0.0235549203 -0.0262223261 0.0443764588 -0.0032653968 0.0295043063 0.0012563789 0.0301930232 -0.0154310954 0.0340805723 0.0126006013 0.0260203115 0.0056675475 0.0079865962 -0.0202239189 0.0278247132 0.0403020541 -0.0764708357 0.0740518755 -0.0168371557 0.0069316891 -0.0349053743 0.0667924502 -0.0733402052 0.0716503208 0.0387777133 -0.0197210575 0.0287304454 0.0016037650 0.0085770640 0.0117029571 0.0216919139 0.0290083992 -0.0340266497 -0.0426377423 -0.0689139387 0.0159874331 0.0329074747 0.0211025028 -0.0299468066 0.0068104370 0.0047963905 0.0148799592 0.0494288899 0.1035235797 -0.0206443013 0.0777161285 0.1322197656 -0.0970560064 -0.0171159333 -0.0239102998 0.0189569560 0.1202892623 0.1017607063 -0.0858028965 0.0792995121 0.0760077382 -0.0142640167 0.0313480891 -0.0000227892 -0.0251869806 -0.0514273156 -0.0197841499 -0.0014109979 0.0166222404 0.0069116200 0.0064108968 -0.0094920091 0.0213168747 -0.0005442320 0.0089444015 0.0095549792 0.0438258566 0.0148244333 0.0120710472 -0.0140489030 -0.0303187238 0.0106592119 0.0207949695 -0.0453556410 0.0143138763 0.0055620938 -0.0536224519 0.0161184827 -0.0120300318 -0.0778186475 0.0094887792 -0.0338651681 0.0009374135 0.0288256579 -0.0267162269 0.0095104540 0.0040334527 0.0294431140 -0.0136317168 0.0321396069 -0.0371228108 0.0350301169 -0.0344134052 0.0487885579 -0.0804567797 0.0248183019 0.0814081683 0.0094306642 0.0136553552 0.0554100172 0.0311447162 0.0564372289 -0.0235279228 0.0500704505 0.0110221193 0.0131757989 0.1269292247 0.0435339172 -0.1388493787 0.0662017373 -0.0579998463 -0.0985399140 0.1081128732 -0.0141752367 -0.0158818909 0.0681389090 0.0092133467 0.1082324865 0.1846953018 -0.0191730270 -0.1474384733 0.0707497128 0.0029418433 0.1115253377 -0.0186885276 -0.0365939271 -0.0321957025 0.0036690737 -0.0452429487 0.0138598027 -0.0504169181 -0.0965997668 -0.0753794285 -0.0043880193 -0.0514886580 0.0044605878 0.0199460956 0.0125117680 -0.0008197679 0.0877456674 0.0428711245 0.0146602821 -0.0088197116 -0.0307084411 0.0400103628 0.0266996121 0.0034011377 0.0273167716 0.0049852346 0.0039973397 0.0104786758 0.0099408938 0.0033109823 0.0094032888 0.0162921296 0.0017799357 0.0205205784 -0.0331923692 0.0023581776 0.0313664222 0.0065616642 -0.0158158144 0.1155930446 0.0587421684 0.0256525690 -0.0713940284 -0.0130959628 -0.0007452855 0.0111112981 0.0072645274 0.0164498503 0.0068154571 0.0063979983 0.0058150960 0.0206261036 -0.0081287923 0.0128480182 0.0749630123 -0.0019767335 0.1224165701 -0.0758641449 -0.1052548388 -0.0982523527 0.0713379775 0.0708129559 0.0164827725 -0.0253925029 -0.0434313049 -0.0640026306 -0.0185085400 -0.0588305819 0.0164599235 0.0983073556 0.0664506828 0.0530980651 0.0449515088 0.0498575332 -0.0705164726 -0.0273031307 0.0198462743 -0.0086721047 -0.0697204245 -0.0626291681 0.0790506980 0.0249822573 0.0329779544 -0.0437861886 -0.0097778699 0.0246901185 0.0671774498 -0.0407601533 0.0620376462 -0.0129335476 0.0293237887 -0.1326782844 0.0113711464 -0.0387063867 0.1966855636 -0.0899504172 0.1174832722 0.0365737919 0.0553644415 -0.0096673783 0.1511803571 -0.1546787371 0.0573529664 0.0508120213 0.0482397874 0.0720683183 0.0378540183 0.0262012875 0.0590209305 0.0669460455 -0.0017616972 0.0244617784 -0.0331256355 0.0416388327 0.0286557932 -0.0134724293 0.0121970949 -0.0560023293 -0.0270578310 -0.0240053459 0.0003568978 0.0068406410 0.0096186307 -0.0171091153 0.0292864655 -0.0139904367 -0.0225113644 -0.0084947853 -0.0290362425 -0.0055747130 0.0129234580 -0.0601156067 -0.0172353503 0.0204358717 -0.0486162374 -0.0388402584 0.0523694696 -0.0601416812 0.0073142006 0.0338131676 -0.0442698441 0.0334987915 -0.0174732676 0.0282152744 -0.0598291485 -0.0342399723 -0.0869189897 -0.0121671920 -0.1021363080 -0.0563958880 -0.0080860797 -0.0827968279 -0.1113426406 0.0599519700 -0.0014035623 -0.0094509743 0.0087720739 -0.0003893607 -0.0089090798 0.0024984150 0.0036482200 -0.0039265072 0.0002646886 0.0004951317 0.0035049586 0.0005310635 0.0002097909 0.0036221763 -0.0044090837 0.0047272401 0.0032251511 0.0020568602 -0.0031541121 0.0026112529 0.0028781084 -0.0061504612 -0.0057925293 -0.0058372023 0.0038692424 -0.0002987069 -0.0026668906 -0.0025447592 -0.0060360035 -0.0034109407 0.0021430523 0.0039510032 -0.0110027681 -0.0014970149 0.0040675697 -0.0010427027 -0.0008456571 -0.0027466200 -0.0008665810 0.0021246833 -0.0076791056 -0.0013505668 0.0144024689 0.0006198687 0.0119459427 -0.0052529261 0.0024821836 0.0059869710 -0.0037676388 0.0008134610 0.0042677986 -0.0009410186 -0.0004391391 0.0012318237 0.0079115673 0.0010497846 -0.0027628431 0.0103769561 0.0005855765 -0.0063157057 -0.0000192281 0.0047178254 0.0078841877 -0.0520338379 0.1161110660 -0.0799326696 -0.0110316426 0.0224812527 -0.0044386265 0.0368085940 -0.0535875577 0.0878066692 -0.0127545175 0.0759095947 0.0016303241 0.0610172294 -0.0326062599 0.0708274644 0.0142485723 0.0355828560 -0.0156942267 0.0013906832 -0.0806370185 0.0338835702 0.0664868265 -0.1790692118 0.1747146133 -0.0255134788 0.0226016429 -0.0606203293 0.1576611132 -0.1573572776 0.1599079534 0.0820682692 -0.0603152723 0.0201307534 -0.0109900351 -0.0127591232 -0.0146114580 0.0361558036 0.0374595375 -0.0716048580 -0.0495519339 -0.0861773595 0.0101550940 0.0543472877 0.0274071547 -0.0639037281 0.0054802366 -0.0301825678 -0.0052758918 0.0516480599 0.1087518952 -0.0577019346 0.1190588836 0.1769439226 -0.1526617037 -0.0265468473 -0.0173464592 0.0603005162 0.1774617397 0.1543373152 -0.1441907399 0.1015178567 0.0705051443 -0.0508688596 0.0533335703 -0.0038156895 -0.0442579155 -0.0817676846 -0.0346647537 -0.0042397793 0.0582710512 -0.0094504969 0.0333719447 -0.0573260945 0.0547124411 0.0079003190 0.0010759279 0.0109572591 -0.0260179304 -0.0587623550 0.0248468225 -0.0809817713 0.0524916361 0.0023048369 0.0356291361 0.0049674620 -0.0174852306 -0.0735986181 0.0968701515 -0.0063955080 0.1445653252 -0.0096796873 -0.0253613603 -0.0835061880 0.0171757960 -0.0202793288 0.0007454695 0.0339574028 -0.0216059807 0.0065554455 0.1087408719 -0.0353641389 0.0987986759 0.0905045570 -0.0112997982 0.1127491231 -0.0184086292 -0.0119268331 0.0381673652 0.0207652694 -0.0103328353 -0.0479255861 -0.0036009755 -0.0065862195 0.0334707139 0.0357721585 -0.0012648978 -0.0368460022 0.0090570928 -0.0089979537 0.0252049181 0.0829905571 0.0019916984 -0.1046322363 0.0046636036 -0.0087546427 -0.0257328510 -0.0247574614 0.0059260927 0.0408484603 -0.0095085989 -0.0076549261 -0.0147677593 -0.0678937030 0.0225452314 0.1053800895 0.0048472588 0.0052372085 -0.0012872754 -0.0056533291 0.0096153121 -0.0211946180 0.0228065816 0.0242381053 0.0081777506 0.0014819389 0.0065996165 -0.0056284817 -0.0084501633 -0.0086693841 0.0012570289 -0.0192808888 -0.0168211365 -0.0045334548 -0.0012929731 -0.0010273608 -0.0074253707 -0.0066246598 -0.0053943720 0.0018987032 0.0011482620 -0.0019743811 0.0111363320 -0.0155619447 -0.0016709890 -0.0106571941 -0.0101718847 -0.0031903065 -0.0023456230 0.0128794996 -0.0036538771 -0.0154342825 0.0137485152 -0.0001337991 -0.0153791905 -0.0558252025 -0.0173208859 0.0377805836 -0.0110362691 -0.0000306017 -0.0104343928 -0.0026339773 -0.0235329213 -0.0031397488 -0.0155006815 -0.0139061646 0.0076765187 0.0018506042 -0.0206183102 -0.0478942708 -0.0295717157 -0.0374001183 0.0167950908 0.0452649392 0.0349928483 -0.0175788279 -0.0246409811 -0.0194729950 0.0080027319 0.0255491516 0.0216835111 -0.0104655439 0.0136411380 0.0170539620 -0.0609362350 0.1513853489 -0.1375358540 0.0774268880 0.0567842342 -0.1221439218 0.0447613062 -0.0115301311 0.0053262801 -0.0416656702 -0.1090057964 0.1213809522 -0.0771970776 0.0827453410 -0.0769202621 -0.0188856299 -0.0242063034 0.0786051565 -0.0231147630 0.1137441478 -0.0460292417 0.0641972567 -0.1785232887 0.0956048279 -0.1179141270 0.3722671651 -0.3129263473 0.1584957906 0.0288023511 0.0332177405 0.0304168907 0.3754380276 -0.2438327973 0.2071293801 0.1112368306 -0.0439943860 0.0717421057 0.0868419895 0.0755549132 -0.0216563892 0.1102889419 0.0865999680 -0.1130423901 -0.0442816569 0.0116693855 0.0006394924 0.0008676397 0.0260732416 -0.0083057411 -0.0343698306 -0.0177664810 0.0072867123 -0.0304034145 -0.0218295189 0.0047713673 0.0154068928 -0.0091878878 -0.0049617858 0.0132480211 -0.0087659978 0.0104687958 -0.0283265204 -0.0370221082 0.0280807425 -0.0358972279 -0.0541027809 -0.0206292145 0.0422352050 -0.0319677211 -0.0247213675 0.0467238477 -0.0216945853 0.0416289556 -0.0050805138 0.0424557869 -0.0122199525 -0.0171687437 -0.0707341321 0.1099543518 -0.1107576124 -0.1005771856 0.1485377365 0.0395802333 0.0492791801 -0.0320136110 -0.0091219193 0.0024588916 -0.0369309964 -0.0088024763 -0.0024248536 0.0017146055 -0.0186190669 -0.0286273849 0.0476178551 0.0052182925 0.0210518978 -0.0002741864 -0.0009115869 0.0090114579 -0.0137981319 0.0127060670 0.0045136077 0.0048491180 -0.0068470904 0.0081865067 0.0069772079 -0.0108531711 -0.0025024698 0.0030251496 -0.0082382410 0.0069658914 0.0121402360 0.0020697650 0.0165896762 -0.0138957299 -0.0025221293 0.0092233266 -0.0070527445 0.0003924352 0.0103323785 -0.0168607185 0.0055139135 -0.0062663085 0.0053610197 -0.0010109804 -0.0056363823 0.0013756882 0.0318939748 -0.0014874187 0.0160510684 -0.0310157879 0.0092098489 0.0281183882 -0.0063539500 -0.0083417379 0.0060479706 0.0029854839 -0.0119819385 -0.0044231689 -0.0028958160 0.0071848991 0.0050206254 -0.0012789781 0.0111769507 0.0079233557 -0.0098136346 0.0092683725 0.0186031248 0.0054043281 -0.0232184723 0.0110357263 0.0000431967 -0.0115906917 -0.0029729795 -0.0115474132 0.0139401660 -0.0194491668 -0.0008612604 -0.0079282304 -0.0022089218 -0.0121471722 0.0006609963 -0.0103972344 -0.0067478408 -0.0094637766 -0.0015509184 -0.0004525371 -0.0038811664 -0.0056819402 -0.0113676511 0.0273580589 -0.0305106542 0.0067355955 0.0005031444 0.0132471958 -0.0245064486 0.0133091240 -0.0206586451 -0.0140621467 0.0038592590 -0.0081626723 0.0090735927 0.0036580472 0.0014304208 -0.0148770728 -0.0212352888 0.0349703772 0.0236426857 0.0403057826 -0.0030824926 -0.0261009084 -0.0135182550 0.0308316946 -0.0012989058 0.0130951866 -0.0031181965 -0.0194438886 -0.0582094814 0.0216117836 -0.0517205246 -0.0905603205 0.0777787505 0.0118881877 0.0088198387 -0.0280400878 -0.0886883900 -0.0747863343 0.0712728273 -0.0533256789 -0.0369631975 0.0174523502 -0.0115562763 -0.0006946110 0.0092814111 0.0225817552 0.0085576528 -0.0001638544 -0.0281325170 0.0049292508 -0.0154493803 0.0245453478 -0.0241097035 -0.0048133620 -0.0072549407 -0.0054877476 0.0045547223 0.0138307868 -0.0092551523 0.0095501867 -0.0130453542 -0.0004001285 -0.0020130157 -0.0072327103 0.0105868626 0.0169535385 -0.0112619501 -0.0010433103 -0.0194226777 -0.0037923981 0.0111206306 0.0213018738 0.0005072843 0.0071840935 0.0023538629 -0.0057692676 0.0097418210 -0.0029136143 -0.0194774277 0.0107384931 -0.0075461198 -0.0146828852 0.0026099610 -0.0231842542 0.0052846766 0.0055877314 -0.0301522263 0.0062399994 0.0011566206 0.0139874303 -0.0021722926 0.0155742452 -0.0080510349 -0.0086497979 0.0074785007 0.0152595199 -0.0130589309 0.0171449455 0.0171369393 -0.0412456173 -0.0058993065 0.0481516071 0.0094483085 0.0035635799 0.0264328846 0.0331272802 0.0030326312 -0.0095403620 -0.0021959864 0.0048318514 0.0411506161 0.0486279355 -0.0071830392 -0.0283175084 -0.0143721217 -0.0309034119 -0.0439102312 -0.0122478254 -0.0250070655 -0.0240972984 -0.0155413785 -0.0572798730 -0.0695336368 -0.0149182553 -0.0509827776 -0.0171525713 0.0144156701 -0.0036830957 -0.0018068883 0.0730810860 0.0256584668 0.0143526136 -0.0154756040 -0.0403367324 0.0362809747 0.0247843994 -0.0055981600 0.0234111453 0.0177313193 -0.0558677786 0.0246387452 0.1366681332 -0.0975391933 0.2156765036 0.0323803595 -0.0702103330 0.0787153660 0.0559715574 -0.0361709973 0.0954320076 0.0361063871 -0.0630732200 0.0000236084 -0.0356008229 -0.0457931821 0.0030335153 -0.0396845817 -0.0193145962 0.0858616978 -0.0480601892 -0.0470640326 0.0639658796 -0.0209461342 -0.0386701607 0.0003695844 -0.1416819142 -0.0473545384 0.1911046304 -0.0306787069 -0.0155104493 -0.0339134453 0.0431175868 -0.0240046122 -0.0592116738 -0.0046493365 0.0346342513 0.0206433004 -0.0409110801 0.0335799370 0.0030841234 0.0532058849 0.0053784427 0.0032107008 -0.0147419384 0.0181613491 -0.0241713759 0.0110797523 0.0140587690 -0.0017367531 0.0006731747 -0.0013734893 0.0088100305 0.0027395612 -0.0138602066 0.0038653053 -0.0123724069 0.0101935300 0.0135899231 -0.0083234634 -0.0169607275 -0.0042404341 -0.0160901556 -0.0058860536 -0.0107117819 0.0156384657 0.0023793620 0.0146082245 -0.0348222451 0.0247270080 -0.0013194782 -0.0099519886 -0.0151863982 -0.0143978982 -0.0318787793 0.0093564137 -0.0181861030 -0.0141393000 0.0000712340 -0.0085297864 -0.0102728109 -0.0072862652 0.0017922259 -0.0124297385 -0.0105279394 0.0139805766 0.0030495830 0.0019864607 -0.0012498260 -0.0014188581 -0.0004618509 0.0007673810 0.0049209812 0.0015189285 -0.0011462902 0.0023009393 0.0026469453 0.0001977777 -0.0000576273 -0.0006982501 0.0017467612 0.0001808104 -0.0000170904 -0.0015047058 0.0055015900 0.0017970184 -0.0027678294 0.0001538875 0.0050507469 0.0001213408 -0.0019132813 -0.0001183817 0.0048680074 -0.0028148172 -0.0001132149 -0.0050099077 -0.0034408919 0.0002660515 0.0006169476 0.0134453791 0.0128039051 -0.0205612917 0.0371286467 0.0192675097 -0.0283551331 0.0480523156 0.0634996643 -0.0491398075 -0.0007564671 -0.0009396461 0.0033047263 0.0016111618 0.0022534189 0.0004482047 0.0006212063 0.0039755870 -0.0017877952 0.0005764742 -0.0014646320 -0.0000166241 0.0001507654 -0.0016747254 0.0026836090 -0.0026939942 -0.0015113066 -0.0012087875 0.0021682742 -0.0012685603 -0.0017555062 0.0033218943 0.0011825216 -0.0002423270 0.0023170423 -0.0007897911 -0.0023329588 0.0004250913 0.0017578259 0.0015791931 -0.0030526343 -0.0015852973 0.0019229817 0.0009449465 -0.0059992056 0.0033764789 -0.0046739629 -0.0022341500 -0.0018885584 0.0001636753 0.0032682263 0.0003203039 -0.0040951634 -0.0014269581 -0.0080060082 0.0017459885 -0.0011165421 -0.0021549654 0.0026098654 -0.0016333427 -0.0027531256 0.0013420360 -0.0009486035 -0.0016118687 0.0011274621 -0.0009933848 -0.0015620922 0.0006651236 -0.0010947901 -0.0013644444 0.0029439464 -0.0016145367 -0.0040556647 -0.0308218013 0.0608579187 -0.0536807315 -0.0215565472 0.0307844947 -0.0187500488 0.0260713886 -0.0431480829 0.0747899281 0.0049212139 0.0401158707 0.0179236748 0.0596735305 -0.0136337373 0.0577199172 0.0223246289 0.0380606954 -0.0204971055 -0.0246913373 -0.0199027257 -0.0036613114 0.0286689497 -0.1217627584 0.1426253215 -0.0222237431 0.0054747902 -0.0572627726 0.1331212703 -0.0827457417 0.1166421367 0.0825182239 -0.0159478183 -0.0180769869 0.0204655439 0.0204548935 -0.0064054266 -0.0270313984 -0.0244210560 0.0694150356 0.0199632994 0.0579882757 0.0130055121 -0.0589549859 -0.0017985417 0.0611699610 -0.0161630118 0.0428219792 -0.0098470758 -0.0067997769 -0.0575696742 0.0150674084 -0.0673754444 -0.1278529526 0.1409180998 0.0206296064 -0.0009444588 -0.0629466223 -0.1603249314 -0.0723978021 0.1238620053 -0.0986135488 -0.0111057124 -0.0006956695 0.0474672909 0.0005981029 -0.0448309380 -0.0837628541 -0.0299749416 -0.0042341261 -0.0537424718 0.0123692959 -0.0419372990 0.0746255833 -0.0576895095 -0.0088559074 -0.1068970756 0.0319344698 -0.1520487879 -0.0233468955 0.0204466773 -0.0793961605 -0.0205867064 0.0220264810 0.0336886803 -0.0201707065 0.0159704857 0.0393601109 0.1082890907 -0.0033346262 0.2630925430 0.0682372564 -0.0200982265 0.2258162261 0.0681514990 0.0165466634 0.0691446957 -0.0364918847 0.0138616668 -0.0739268132 0.1953964895 -0.0042221402 0.2573107278 -0.0130001425 -0.0220900031 -0.0566691908 0.0364333847 0.0138346673 -0.0756785744 0.0821641064 0.0036358053 -0.1229286477 -0.0454669598 0.0232721039 0.0513138640 0.0222938758 -0.0029411742 -0.0515930018 -0.1572931082 0.0374821686 0.2091654329 -0.0132619662 -0.0170829116 -0.0154808720 0.0092277329 0.0118848217 0.0308817198 0.0141092838 0.0000946950 0.0136893786 -0.0928729237 0.0204972573 0.2267807800 -0.0546587021 -0.0083460965 0.1509769417 0.0012734304 0.0017367667 0.0024040768 0.0011994189 -0.0002781667 -0.0019732068 0.0027191208 0.0040123796 0.0039365559 0.0035938715 0.0046950998 0.0017664395 -0.0038090325 -0.0000615053 0.0000222708 -0.0110684421 0.0013263545 0.0028274682 -0.0006712225 -0.0001918321 -0.0016209499 -0.0039065797 0.0026601087 -0.0060630407 -0.0266154536 -0.0123482954 -0.0830336011 0.0061522886 0.0191541663 -0.1506114225 0.0183093931 0.0145068040 -0.0733097734 -0.0845569379 0.0119629721 -0.0368144469 -0.0559886851 -0.0129358816 -0.0206875593 -0.0703990187 0.0150889407 0.0057379625 -0.1053366739 0.0117281870 0.0532974715 0.0062962607 -0.0471112431 0.0942691877 -0.0311357727 0.0050447265 0.0957234931 -0.0313595402 -0.0512822022 0.2074829819 -0.0063342518 -0.0414712829 -0.0966837128 0.0175073544 0.0227172669 0.0768946558 0.0505204814 -0.0010398698 0.0153170404 -0.0363765346 -0.0364891778 -0.0171074011 -0.0030706875 0.0536630398 0.0071868633 -0.0075622062 0.0247066462 -0.0124285351 -0.0089742158 0.0066642280 -0.0118416061 -0.0075860810 -0.0054585359 -0.0034514018 0.0020024957 -0.0000694174 -0.0003196377 -0.0057494194 -0.0048116089 0.0058694179 -0.0026940888 -0.0135886854 -0.0027696197 0.0002313305 -0.0021676882 -0.0094796931 0.0087899130 0.0013492810 0.0039626661 -0.0152061156 -0.0028176684 -0.0018885740 -0.0049783916 -0.0122022750 0.0024633690 -0.0052576467 0.0034043123 -0.0118163529 -0.0042378426 0.0009288705 0.0019024906 -0.0043036442 -0.0068594466 0.0083928271 -0.0030891179 -0.0124481549 0.0148627707 -0.0061593995 0.0141345809 0.0005690729 -0.0063010227 0.0040377372 -0.0048179046 -0.0003030769 0.0015519020 0.0012320981 0.0034902378 0.0057759756 -0.0040955385 0.0031118028 -0.0060886486 -0.0009477020 -0.0010039459 -0.0063286345 0.0023358470 0.0110990730 -0.0109330081 0.0000617951 0.0153267110 -0.0086263236 -0.0008402500 0.0108314865 -0.0208559986 0.0084543310 0.0084860616 -0.0190554305 0.0055940791 -0.0051301171 0.0066480610 -0.0054330591 0.0042405532 0.0098222564 -0.0060429180 0.0089292721 0.0174023514 -0.0075577713 0.0537404183 0.0546887636 -0.0534043035 -0.0008799166 -0.0010062952 0.0031583654 0.0014480249 0.0011109181 0.0006485863 0.0013935262 0.0025523472 -0.0011069286 -0.0000689070 -0.0008908292 -0.0001686278 -0.0003460081 0.0000666482 0.0013723779 -0.0007816228 -0.0010304441 -0.0003153097 0.0005451246 -0.0004110216 -0.0002223116 0.0021734881 0.0005525013 -0.0005545374 0.0021103122 -0.0007829672 -0.0021412321 0.0011059234 -0.0001344230 0.0031407984 -0.0006662283 0.0000170953 -0.0002165972 0.0006570038 -0.0028548123 0.0008123354 -0.0001919795 -0.0017556813 0.0010655740 -0.0010661056 0.0026184652 0.0008665524 -0.0067820643 0.0005825629 -0.0033441815 -0.0000314076 -0.0001251996 -0.0009191925 0.0012420664 -0.0006972711 -0.0019359771 -0.0011018292 0.0000705190 -0.0000043630 0.0013702154 -0.0008230505 -0.0014158797 0.0010632236 -0.0010812496 -0.0015424933 0.0023241736 -0.0010996639 -0.0028097037 0.0261786286 -0.0262136279 0.0442548453 0.0126212967 0.0186756155 0.0290934023 0.0051159626 0.0272069216 -0.0127066993 0.0174963638 -0.0403034342 0.0124345344 -0.0076558244 0.0150108690 -0.0071679261 0.0067180057 0.0216478292 0.0285458046 0.0035557500 0.0854684798 0.0047405947 -0.0022921312 0.0888791259 -0.0624134451 0.0011099528 -0.0210548093 -0.0052816418 -0.0525580122 0.0678007974 -0.0464956625 -0.0393185688 0.0795372214 0.0110111763 -0.0053555919 -0.0110223039 -0.0383117172 -0.0211463634 -0.0392833045 -0.0069209619 0.0433087428 0.0575766731 -0.0381098116 -0.0156275576 -0.0366505097 -0.0067848522 0.0082821255 -0.0238092007 -0.0336054829 -0.0777133553 -0.1094988228 0.0062102191 -0.0956547251 -0.1509801611 0.0537595864 0.0126048973 0.0351506594 0.0277931373 -0.0943111059 -0.1392283081 0.0468083024 -0.0719467957 -0.1158198050 0.0113790444 0.0024413592 0.0070060476 -0.0068502826 -0.0182781289 0.0023789022 0.0015860730 0.0299126836 -0.0240485509 0.0264802967 -0.0460798101 0.0186796572 0.0098138897 0.1123794519 -0.0038328274 0.1217993841 -0.0019465150 0.0226343403 0.0382098278 0.0226642193 -0.0196797615 -0.0162187716 0.0074993986 -0.0396591574 -0.0539301559 -0.1133798425 0.0088651136 -0.1803466131 -0.0758860786 -0.0068549930 -0.2273108929 -0.0653080061 -0.0012215225 -0.0794301958 0.0247912887 -0.0373808684 0.0834792601 -0.1260430687 0.0067556532 -0.2332825137 0.0337956636 -0.0183284830 0.1116202679 -0.0158900284 -0.0169148929 -0.0469465817 0.1424540500 -0.0327606934 -0.1630346735 -0.0836919736 0.0327452031 0.1030987597 0.0468295949 0.0348124300 -0.1141107101 -0.1574378602 0.0419684914 0.2813041719 0.0541697201 0.0009643670 -0.1678720219 0.0450357674 0.0164186025 0.0176746365 0.0249455780 0.0413145125 0.0802921403 -0.1250964266 0.0313154449 0.2295830458 -0.0913914896 0.0254743203 0.3136053377 0.0014386761 0.0019965557 0.0020968795 0.0005266203 0.0006575581 -0.0030752580 0.0041456612 0.0048540156 0.0034692053 0.0033749115 0.0045733728 0.0015037634 -0.0035674869 -0.0010390861 0.0011797417 -0.0087597475 -0.0065602401 -0.0032551065 -0.0016652257 0.0038564124 -0.0028966998 -0.0014053857 0.0002936803 0.0031870165 0.0013756947 0.0089589599 0.0105881365 0.0550481930 -0.0293799782 0.2028057024 0.0109891378 -0.0156315632 0.0694302406 0.0278514853 0.0072558628 0.0266319638 -0.0002363941 0.0114447862 -0.0491510028 0.0182676705 0.0224098176 -0.0602818943 -0.0033866607 0.0180593351 0.0015054586 0.0239770989 0.0042533686 0.0383474734 0.0361512763 0.0436617452 -0.0242531889 0.0229375700 -0.0026043994 0.1378057010 0.0107946811 -0.0449387915 0.0140717727 0.0210514029 0.0160409097 -0.0220049639 -0.0328110172 -0.0244417073 0.0284230679 0.0095817659 0.0229328697 0.0019738842 0.0026088336 -0.0092991448 -0.0245686143 0.0514605731 -0.0761835987 -0.0002299315 0.0500565691 0.0526604484 0.0122308570 0.0167370690 0.0394970450 0.0206965619 -0.0352688420 -0.0126396386 0.0077139935 0.0079984951 0.0291645051 0.0437781661 -0.0040324724 -0.0030107808 -0.0053938783 -0.0277438478 -0.0358405092 0.0192711672 -0.0289141482 0.0160975145 0.0276260809 0.0397426558 0.0350777807 0.0740300591 0.0224708254 -0.0213036004 -0.0523471835 -0.0136824930 -0.0563544542 0.0248629233 0.0259578639 -0.0092128312 -0.0125593690 0.0263432767 0.0703349733 -0.0546154923 0.0245681256 0.0885704313 -0.0832349961 0.0524227924 -0.1048257836 0.0097249367 0.0494442325 -0.0501424431 0.0329845663 0.0067231724 -0.0215079679 0.0041120974 -0.0171624514 -0.0270950664 0.0124961472 -0.0336766049 0.0445567304 -0.0050681497 -0.0173995453 0.0537011810 -0.0082668787 -0.0679666977 0.0642959799 0.0044488182 -0.0783139305 0.0498574080 -0.0118605443 -0.0981390710 0.1548279111 -0.0586722141 -0.0994808903 0.1678080810 -0.0339395452 0.0642252245 -0.0780322558 0.0396832126 0.0159379485 -0.0196946303 -0.0401568723 0.0063243102 0.0389719313 -0.0632298966 0.0422777768 0.0732822935 0.0144485034 0.0044966465 0.0083641003 -0.0394873882 -0.0070944996 -0.0030337267 -0.0046904876 -0.0158060682 -0.0220162195 0.0225981353 0.0032781013 0.0126323082 0.0006113020 -0.0015622371 0.0051824282 -0.0085995138 0.0089718109 -0.0008427422 0.0028701510 -0.0049532661 0.0053090588 0.0052946472 -0.0097320328 0.0016133910 0.0087252674 -0.0175500535 0.0065561168 0.0169868567 0.0016261346 0.0094832771 -0.0069627137 0.0015745044 0.0050532124 -0.0029750701 -0.0012976485 0.0088932657 -0.0109117855 0.0112038385 -0.0016679256 0.0066666309 -0.0009886153 0.0001932525 0.0027450657 0.0090088484 -0.0007815647 0.0078787050 -0.0179457623 0.0064908020 0.0140325440 -0.0031915118 -0.0031407375 0.0012310845 -0.0031800449 -0.0027817131 0.0006113849 -0.0167847110 0.0054787379 0.0111961778 -0.0160878183 0.0087629329 0.0160896545 -0.0153077845 0.0037212299 0.0129236843 -0.0084325516 0.0085200846 -0.0122326459 -0.0030961759 -0.0056891551 -0.0100215056 -0.0024002317 -0.0090387620 -0.0013443626 -0.0061757078 0.0136459484 -0.0081327922 0.0009011439 -0.0044471200 -0.0029738070 -0.0005097246 -0.0088479137 -0.0070871503 0.0063772347 -0.0256460004 0.0000306419 0.0029761899 -0.0306512102 0.0137013166 -0.0010773817 0.0082015556 0.0058925413 0.0113093613 -0.0222875264 0.0081428398 0.0145909241 -0.0305461919 0.0015641757 -0.0656998873 0.0122739506 -0.0000166443 -0.0525592269 -0.0266974819 -0.1276361536 0.0437462273 0.0326610721 -0.1254528559 0.0344883217 -0.0706425132 -0.1159653108 0.0225403751 -0.0517224653 0.0233953912 -0.2105903906 -0.0144108767 0.0739810887 -0.2102738107 -0.0912839088 -0.1563716597 0.0105481674 0.0625191272 0.1388103957 0.0591039882 -0.2255273092 -0.1121423055 0.0241886019 -0.1764930048 0.1406069304 -0.0059300387 -0.0033770887 0.0056839458 0.0107942175 0.0009359612 0.0005088086 0.1500119601 -0.0754226583 0.1076233862 -0.1607419158 0.1012141442 0.0454675829 -0.0671656122 0.0022729194 -0.0958879305 0.0166699815 -0.0128490145 0.0329727488 -0.0247739526 0.0108387431 -0.0503015155 0.0485522089 0.0006736793 0.0753095490 0.0276398643 -0.0003739412 0.0141983387 0.1411590819 -0.0202048963 0.2433848377 0.0396182431 -0.0167886960 0.0704712847 -0.0444254171 0.0134254299 -0.0928473986 0.0596411324 -0.0192778077 0.1220053783 -0.1086367901 0.0307557773 -0.1945183253 -0.0186189194 -0.0161571465 0.0324899231 0.0178163335 -0.0235149334 -0.0188378899 -0.0161725282 -0.0231847546 0.0157694670 0.0011018206 0.0062967235 -0.0477709115 0.0109522664 -0.0254920486 0.0119853879 0.0516751739 0.0208622815 -0.1065627983 0.0001371064 0.0049301317 -0.0427883408 -0.0467224540 0.0132980852 0.0279257621 -0.0126349135 0.0056726863 -0.0679745252 -0.0770323003 0.0116123391 0.0852382720 -0.0207696439 -0.0254647651 -0.0349276879 -0.0101970009 -0.0162626692 0.0132479461 -0.0454289776 -0.0567424695 -0.0529753955 -0.0337159516 -0.0484365531 -0.0244061357 0.0342657391 0.0113647197 -0.0044135312 0.0930260213 0.0322790555 0.0041578667 0.0000287750 -0.0174079114 0.0312468707 0.0429279518 0.0044358916 0.0253119415 -0.0239361751 0.0221794729 -0.0509882080 0.0197844108 0.0163514639 0.0496367988 0.0081416610 0.0205042361 -0.0019068803 -0.0121612532 0.0061071800 0.0224242823 -0.0286143705 0.0167862906 -0.0148125379 0.0490154546 0.0088080321 -0.0235124589 0.0082765011 0.0005153984 0.0424114416 -0.0288162918 0.0237983356 0.0368622588 0.0152987343 0.0049957357 -0.0273482315 -0.0776624126 0.0198988371 0.1557882699 0.0121393186 0.0560244168 0.0118184409 -0.0086243362 0.0108315653 0.0272000471 0.0103790725 -0.0222506601 -0.0063622529 0.0152629619 -0.0212732137 -0.0083379393 -0.0419458115 -0.0017307077 0.0193652080 0.0616188095 -0.1278186638 0.0479724629 0.0552730449 0.0766238302 0.0026450318 0.0256143868 0.0526674619 0.0181724296 -0.0412159665 -0.0153110260 0.0265139114 0.0098935373 0.0373118989 0.0559823577 0.0078820802 0.0026933547 -0.0066712483 -0.0351458286 -0.0401155491 0.0267596695 -0.0400159944 0.0070425419 0.0430865299 0.0433461369 0.0702663026 0.0963835968 0.0365192587 -0.0164528093 -0.0682120930 -0.0356572350 -0.0634146203 0.0209195475 0.0276391794 -0.0078975378 -0.0053686259 0.0251596272 0.1236960993 -0.0778656352 0.0142787087 0.1632906849 -0.1197403744 0.1018361998 -0.1841046127 0.0304371325 0.0873589501 -0.1016795989 0.0460287162 0.0158500087 -0.0425605210 0.0106709764 -0.0155298771 -0.0371803615 0.0130967232 -0.0611818379 0.0823149147 -0.0170933727 -0.0453647039 0.0940581129 -0.0154627725 -0.1102170567 0.1110542672 -0.0040273325 -0.1132984799 0.0931631541 -0.0248690128 -0.1837696544 0.2797765249 -0.0970593605 -0.1965287759 0.3082623747 -0.0605741333 0.1221572300 -0.1547224518 0.0587278247 0.0133588420 -0.0356261530 -0.0720953164 -0.0284752263 0.0633837653 -0.1017651598 -0.0410684158 -0.0612668849 0.0067558507 0.0102903056 0.0166430791 -0.0640954524 -0.0148504313 -0.0111403837 -0.0089153871 -0.0218233586 -0.0406997660 0.0309645557 0.0047394115 0.0208610394 0.0007996952 -0.0012087876 0.0089761733 -0.0182815200 0.0175906337 0.0048946245 0.0055311383 -0.0120729566 0.0110627900 0.0114149463 -0.0233396616 -0.0027928796 0.0122265308 -0.0310587339 0.0113729653 0.0295055654 0.0024909225 0.0142263534 -0.0164273245 0.0010476556 0.0091780085 -0.0110672667 0.0004567795 0.0167851913 -0.0258118759 0.0180387748 0.0016259593 0.0075094760 -0.0003699484 -0.0093562474 0.0002846075 0.0349440809 -0.0000307455 0.0254924943 -0.0279591682 0.0117976882 0.0260328898 -0.0125314827 0.0012791814 0.0125612309 -0.0041490789 -0.0016286776 0.0043282251 -0.0257395014 0.0105128686 0.0178592583 -0.0234852905 0.0159376922 0.0252358779 -0.0303323996 0.0105957487 0.0299603481 0.0106401814 -0.0112722660 0.0208538009 0.0104656127 -0.0021743371 0.0146986627 -0.0034182912 0.0144080699 -0.0222769823 0.0014984493 -0.0136449047 -0.0067822100 -0.0132036769 0.0071021649 -0.0195616442 0.0027763375 -0.0060257361 0.0169926013 0.0163057979 0.0249018876 0.0086169985 -0.0004201710 0.0419218545 -0.0495869419 0.0024788407 -0.0029796625 0.0132761984 -0.0444394527 0.0347100005 -0.0437987513 -0.0228648150 0.0162860123 0.0168910984 0.0298871546 -0.0106283139 0.0032926539 0.0364568488 0.0260475119 0.0565562049 -0.0387786243 -0.0375353353 0.0731683075 -0.0102064849 0.0503054006 0.0506067795 -0.0201830491 0.0234213129 -0.0069683245 0.1266638356 0.0404613646 -0.0494275642 0.1499954883 0.1042475743 0.0482717108 -0.0078304226 -0.0405324426 -0.0687275132 0.0124124101 0.1755354069 0.0246669892 0.0070054894 0.1220265976 -0.0851261070 -0.0137042544 -0.0003964458 0.0104345987 0.0153505459 0.0071376832 0.0026729116 -0.0737505086 0.0401764853 -0.0556451540 0.0847699913 -0.0491671858 -0.0238577808 0.0234675263 -0.0025749024 0.0122770608 -0.0199387353 0.0055280875 -0.0067803130 0.0236321679 -0.0102097329 0.0003459439 0.0097972347 -0.0149318917 -0.0327507234 0.0069792867 -0.0067862758 -0.0087170432 -0.0043650898 -0.0029458083 -0.0725120459 -0.0226105565 -0.0100780844 -0.0155755694 0.0081532830 -0.0125658871 0.0238542929 -0.0175276806 -0.0112248122 -0.0249455387 0.0223064507 0.0053667819 0.0607864311 0.0158899377 0.0018432370 0.0137660482 0.0160371794 0.0083341790 -0.0642604833 -0.0095672653 -0.0130707884 0.0428307909 0.0317958924 -0.0180050665 -0.0331483853 -0.0475199090 -0.0091300420 0.0660181498 0.0660647095 -0.0003304228 -0.0629435676 -0.0085131747 -0.0028411700 -0.0288114369 -0.0408593159 -0.0093635443 0.0171400360 -0.0213022658 -0.0021121317 0.0292144367 -0.0913216864 0.0094910682 0.0933147485 -0.0334308797 -0.0384604099 -0.0528736475 -0.0157376644 -0.0209058750 0.0317224387 -0.0776716120 -0.0893593322 -0.0800916877 -0.0589524498 -0.0776859168 -0.0396509751 0.0610153134 0.0222286765 -0.0094867073 0.1555542249 0.0527183390 0.0012960634 0.0118172777 -0.0254959006 0.0452831142 0.0702188835 0.0061335891 0.0394345899 -0.0502421313 0.0797915031 -0.0712544283 0.0490991941 0.0135537689 0.3360093893 0.0001456076 0.0314378997 0.0894185243 0.0176122489 0.0177838183 0.0400014585 -0.0392655458 0.0533670677 -0.0872407865 0.0421514981 0.0110105190 -0.0776101129 -0.0004459581 0.0152493344 0.0418404653 -0.0371210286 0.0044636668 0.0698918132 0.0233816589 0.0094361367 -0.0499124679 -0.1185101689 -0.0024752001 0.2733483154 -0.0296529523 0.0687527802 0.0310553355 -0.0111252901 0.0062653340 0.0445872520 0.0120066808 -0.0705053877 0.0334669750 0.0434765501 -0.0104011571 -0.0464299180 -0.0344813929 0.0233937072 -0.0384604397 -0.0305120018 0.0552109745 -0.0146012693 -0.0344754069 -0.0516469055 0.0093622716 -0.0095943540 -0.0241252723 -0.0090286603 0.0234324610 0.0113369504 -0.0173300193 0.0039671540 -0.0205598371 -0.0438014612 0.0012650453 0.0149586539 0.0104045244 0.0250231574 0.0278505751 -0.0033945424 0.0143154366 -0.0074093655 -0.0327952751 -0.0057265380 -0.0439570009 -0.0600138234 -0.0141342642 0.0254026943 0.0437352294 0.0320508083 0.0366368258 0.0034610094 -0.0093090878 -0.0021022132 0.0040965641 -0.0103501966 -0.0620030902 0.0331779512 -0.0059879863 -0.0771241367 0.0487365710 -0.0497629615 0.0876779483 -0.0178420429 -0.0439693369 0.0511324172 -0.0182838437 -0.0072581835 0.0235069136 -0.0034016484 0.0076461036 0.0156112122 -0.0074012710 0.0270387667 -0.0429449997 0.0081689344 0.0231090822 -0.0465471014 0.0114878185 0.0503896936 -0.0480269732 0.0053006941 0.0555186929 -0.0395786554 0.0143741749 0.0858675175 -0.1359411547 0.0436092335 0.0960371258 -0.1529149000 0.0315048100 -0.0605090409 0.0817915442 -0.0256925807 -0.0171785333 0.0085639339 0.0547529085 -0.0191899401 -0.0332110976 0.0722779546 -0.0250074572 -0.0350760182 0.0129035314 -0.0004357926 -0.0035000429 0.0293374088 0.0016685564 -0.0031689851 0.0026119730 0.0145684734 0.0100205277 -0.0186398258 -0.0020493890 -0.0062542962 -0.0005357893 0.0001454658 -0.0013949403 0.0034805373 -0.0025954001 0.0009100651 0.0000758736 0.0006747983 -0.0021058945 -0.0010283034 -0.0011160536 -0.0064154945 -0.0080330686 0.0103141733 -0.0042616532 -0.0096998337 -0.0004972469 -0.0083748060 0.0058198532 0.0002560198 -0.0012258868 -0.0046920203 0.0004290472 -0.0055586025 0.0049526370 -0.0023688527 0.0030509197 -0.0030880496 0.0037593557 0.0006015732 0.0003949967 -0.0044741832 0.0015739153 -0.0026130783 0.0104222074 -0.0026910265 -0.0084708868 -0.0002839491 0.0047331128 0.0010221708 -0.0020085964 0.0051140429 0.0031304980 0.0138263602 -0.0024215471 -0.0063924747 0.0143541353 -0.0049712298 -0.0118916480 0.0055637016 0.0018414989 0.0006721279 -0.0086705848 0.0384419831 0.0145616877 0.0487271084 -0.0261641186 0.0142563359 0.0068285652 -0.0046131788 -0.0980047634 -0.0285518365 0.0271359409 -0.0865769610 -0.0447877245 -0.0180223080 -0.0843240685 -0.0061764054 -0.0467637956 0.0337523071 0.1431899409 -0.0633817707 0.0653599968 0.0810519975 -0.0482024222 -0.1240765898 0.0125679417 0.0309299803 0.0921036553 -0.0918700682 -0.0891886102 -0.0815063612 -0.0199807492 -0.1185446164 0.1164860757 0.0131908377 -0.0063992810 0.0066191149 0.0221381856 0.0140842440 0.0136790211 -0.0218873421 -0.0258739088 0.0298038715 0.0015679620 0.0254880893 0.0122620195 -0.0117804639 0.0085272026 0.0038829352 0.0556839111 0.0323982331 -0.0180038039 0.0768093375 0.0642272188 -0.0017213780 -0.0064502789 -0.0205267925 -0.0238724896 0.0287227498 0.0896160562 -0.0093196315 0.0113932512 0.0591282319 -0.0313930021 -0.0991056165 -0.0226808398 0.0762905475 0.1192769355 0.0312298391 0.0214936911 -0.0265853725 0.0167616754 -0.0210371241 0.0312694828 -0.0163451310 -0.0096616058 -0.0478670280 -0.0131826993 -0.0732240934 0.0031065421 -0.0236446718 0.0378439519 0.0033597114 0.0019876659 -0.0694523976 0.0807010310 -0.0114104239 0.0455825810 0.0399867035 -0.0069842360 -0.0482221485 0.1577117575 -0.0244074445 0.1774286582 0.0187225777 -0.0422818561 0.0529832055 -0.0219974973 0.0049775293 -0.0841454148 0.0184168672 -0.0406444810 0.0831527798 -0.0892011576 0.0553637595 -0.1689124580 -0.0053438237 -0.0010242184 0.0449310109 0.0395012794 -0.0044508268 -0.0944404432 -0.0268360375 -0.0158224059 0.0707762670 0.0547646715 -0.0173817924 -0.0807437223 -0.0502649402 -0.0131446552 0.0955025253 0.1331579149 -0.0039547213 -0.1833361227 0.0117790570 -0.0041907336 -0.0666624393 -0.0680550821 -0.0014725573 0.0658275649 -0.0088283573 -0.0028497207 -0.0175596163 -0.1599290555 0.0199043839 0.2168263442 0.0168679297 0.0207144171 0.0305818629 0.0093891557 0.0167704664 0.0013475741 0.0317096489 0.0421837564 0.0439084949 0.0220658011 0.0349252575 0.0205051812 -0.0194015348 -0.0069152453 0.0027093158 -0.0614399024 -0.0282607077 -0.0096152212 0.0091694322 0.0202229143 -0.0289142808 -0.0275673398 -0.0047754987 -0.0165037995 0.0005160349 -0.0011408370 -0.0002626265 0.0054251076 -0.0000439236 0.0040617340 0.0033708711 0.0005029089 0.0008728080 -0.0021693269 0.0000183550 0.0024707615 -0.0025541300 -0.0000815312 0.0008212035 -0.0044353014 -0.0000850081 0.0054510155 -0.0028423096 -0.0000873092 0.0020275550 0.0033397041 -0.0014768447 -0.0034754248 0.0006537843 0.0002182535 -0.0003398694 0.0080310928 -0.0012976789 -0.0121709347 0.0000589470 -0.0036305998 -0.0027420412 -0.0004234061 0.0037889625 -0.0009382146 0.0009421838 0.0005069514 -0.0017158169 -0.0010151727 -0.0029646431 0.0010685970 -0.0024620386 0.0021779582 0.0014189423 0.0193019340 -0.0200741060 -0.0160181525 -0.0904565399 0.0788271556 -0.0613190110 -0.0446232752 0.0132788919 -0.0162245437 -0.0158770152 0.0152109889 -0.0255334095 0.0061517730 -0.0220898944 0.0223773539 0.0184049166 -0.0578996129 0.0135096326 -0.0197423487 0.0102572872 -0.0319202172 0.0443309052 -0.0097301480 0.0174497909 -0.0269046715 -0.0193018697 -0.0057766584 0.0447568795 -0.0806301408 0.0398367791 -0.0349319739 0.0400562577 -0.0346746632 0.0069944324 -0.0061952266 0.0004035559 0.0232716533 0.0187390883 0.0126412930 0.0158007102 0.0475400209 -0.0160358698 -0.0319465689 0.0352250373 0.0023359180 -0.0150702930 0.0280711337 -0.0172820695 -0.0229416862 0.0007191192 -0.0008337952 -0.0110975986 0.0044472453 -0.0001848356 0.0204801173 -0.0156884369 0.0010240572 0.0119071969 -0.0224013471 0.0047466215 -0.0018685957 -0.0267836661 0.0045503298 -0.0035356312 -0.0312679301 -0.0118061030 0.0536683591 -0.0631034105 0.0117619161 0.0564782796 -0.0654769654 0.0302389344 -0.0243927269 0.0404847735 -0.0200775805 0.0051593626 0.0361403321 0.0033922799 0.0395297028 0.0107258937 0.0033682471 0.0027937164 0.0037274944 -0.0001999370 0.0732468187 0.0714263400 0.0141600264 -0.1087384714 -0.1698164839 -0.0163927469 0.0918815570 -0.1706134711 -0.0718512836 0.0217918303 0.0814597606 0.0076935916 -0.0046960135 0.0647425438 -0.0955908910 0.1152473767 0.0234991497 0.0494931061 -0.0714901964 0.0539135668 0.0689536911 -0.2354904365 -0.1710550157 -0.0651801450 -0.0613611664 0.0216267274 0.0638428900 -0.0173932734 -0.0246191809 -0.0703564227 -0.0112510814 0.0722449833 -0.2329764732 -0.0036593281 -0.0052691210 -0.0601826630 0.0552520929 -0.0331189539 0.0174826525 0.1165378050 -0.0259284967 0.0344047108 0.2209924616 -0.0080031447 0.0834665485 -0.0969455065 0.0586494680 0.0861838113 -0.0725949955 0.0454225818 0.0700767329 -0.0680967137 0.0474480512 0.0658214122 0.0762039752 0.0534740235 0.0079180054 0.1078282424 0.0516239959 -0.0302029608 -0.1602607479 0.1521519113 0.3004225691 0.0015506476 -0.0035387142 -0.0004164762 -0.0033383725 0.0019531736 -0.0004429826 0.0000032440 -0.0006741344 0.0082381967 0.0037653784 -0.0046080145 0.0081643616 0.0039057020 0.0033916050 0.0056442076 0.0026808075 0.0030994761 -0.0015431290 -0.0121286454 0.0092209801 -0.0064809748 -0.0097932216 0.0106693230 0.0061486750 -0.0018737520 -0.0033960280 -0.0076485725 0.0052049708 0.0143147010 0.0024428958 0.0030793212 0.0102628424 -0.0088811144 -0.0009963092 0.0003139295 0.0010739802 -0.0027119589 -0.0035853485 -0.0013837264 0.0004751836 0.0009841541 -0.0028599749 0.0003165361 -0.0005221025 -0.0027016018 -0.0007121675 -0.0009812893 0.0019670254 -0.0036140620 0.0006960829 0.0023345596 -0.0049556652 -0.0036988180 -0.0024247682 0.0003501508 0.0020454380 0.0022127125 0.0021140106 -0.0034194836 -0.0033629877 -0.0018754137 -0.0051256916 0.0052839226 0.0078351047 0.0019110437 -0.0060683475 -0.0106047277 -0.0028568086 -0.0015711117 0.0014556615 -0.0027275265 0.0021752016 -0.0030449108 0.0020377444 0.0008798478 0.0003764656 0.0013998402 -0.0038100777 -0.0015725140 0.0015234828 0.0006463103 0.0008758157 -0.0006335330 -0.0012331658 0.0017651832 -0.0020245096 0.0001046723 0.0007007591 -0.0004885810 0.0032699579 0.0048799985 -0.0011834961 0.0034300873 -0.0001727064 -0.0005069618 0.0027829239 -0.0029037136 -0.0010783003 -0.0007246713 0.0037021928 -0.0014037080 0.0034056080 -0.0039771608 0.0006983836 -0.0014036980 0.0025118230 -0.0007741937 -0.0069266598 -0.0019505085 -0.0009687157 0.0062266960 0.0027611049 0.0000883278 -0.0069097309 -0.0060734961 0.0017871521 0.0075335941 0.0026036199 0.0002296238 -0.0037753636 -0.0154219944 0.0020406650 0.0221109182 -0.0026583176 0.0006859089 0.0070986253 0.0059751653 0.0004042535 -0.0081738478 -0.0044430734 0.0008396202 0.0072475682 0.0135525644 -0.0016401669 -0.0204217378 0.0359406263 0.0687112123 0.1233179582 0.0439672086 0.1421491890 0.2809640379 -0.0540341314 0.0509534941 0.1502133906 -0.0817680924 0.0039434209 0.0465922381 0.1465330075 0.0515137853 -0.0598295228 0.1340718851 -0.0077466847 -0.1151317089 0.2629519410 0.0795814217 -0.1408316663 0.0479263958 -0.0379497344 -0.0804167284 -0.0165873878 -0.0062155456 -0.0658822238 0.1461809997 -0.0038169562 0.1563892256 0.0693758974 0.0177103712 0.0184300178 -0.0365566996 0.0103794547 0.0341100438 -0.0692106342 0.0172409859 -0.0535293489 0.0219924330 0.0098927332 -0.0312498949 -0.0143241933 0.0068528054 0.0419236489 -0.0114911420 0.0168037264 0.0144534093 0.0347443168 0.0167507026 -0.0761811557 -0.0535434589 0.0129412458 0.1260139799 -0.0030429388 0.0075826559 0.0440787767 0.0447639066 0.0905533193 0.0430048502 -0.0159979001 -0.0441058895 0.0058479250 0.0426722966 -0.0018289866 -0.0109324744 -0.0171471961 0.0128367178 -0.0577903788 -0.1085223708 -0.0793148686 0.1958159263 -0.1645955201 -0.0955594158 -0.0193005480 -0.0166670131 -0.0363893877 -0.0593235409 0.0600201379 0.0496872715 0.0012932830 0.0323810978 -0.0600189246 -0.1331797162 0.0771185295 0.0823721584 0.0514908332 0.0626270041 0.1191389864 0.0103766390 0.0306658762 -0.0821887596 -0.0641485970 -0.0065364695 -0.0371239279 -0.1611920065 0.0426712436 0.1047733318 0.1528756731 0.0293772585 0.1491492602 -0.0085474564 -0.0729642950 -0.0315695104 0.0727168310 -0.0880397126 0.0013629186 0.0398602130 -0.1360140274 0.0632676969 0.0656717630 0.0521242798 -0.0293795289 0.0378275004 0.0108171576 -0.0478742986 -0.0259525915 0.0189555947 -0.0052434885 -0.0012462693 0.0509365341 0.0120988663 -0.0083730545 -0.0066572570 0.0268202685 -0.0132245852 -0.0346181267 0.0066114751 -0.0152529297 -0.0025939111 0.0520632352 -0.0562366495 0.0092407595 0.0734781751 -0.0215151640 -0.0760319567 0.0979245800 0.0144688877 -0.0849674784 0.0780981658 -0.0313954960 0.0106029428 -0.0481818245 -0.0260347662 -0.0847058227 -0.0274664430 0.0895410298 -0.1065782039 -0.1054604605 0.1262395424 -0.0214480157 -0.0208610150 0.0270523615 -0.0075596609 0.0131948367 0.0063326336 -0.0053856388 0.0050165287 -0.0020415950 0.0113184834 0.0044838167 -0.0149437571 -0.0013043573 -0.0032352999 -0.0001662671 0.0000889845 -0.0033808956 0.0048069863 -0.0042712822 -0.0018726178 -0.0014298993 0.0017480251 -0.0029109376 -0.0019495809 -0.0006129939 -0.0066734431 -0.0051026596 0.0062822429 -0.0019057257 -0.0064208703 0.0004743933 -0.0073619519 0.0073304586 0.0035184570 -0.0035058265 0.0016614770 -0.0001550914 -0.0017561263 0.0043805395 0.0015592368 0.0056909796 -0.0018685577 -0.0021525772 0.0021196643 -0.0002478654 -0.0107073412 0.0003135974 -0.0030426138 0.0114726902 -0.0032660299 -0.0104351846 0.0014539292 0.0044992221 -0.0012753784 -0.0015595445 0.0055047103 0.0027714233 0.0123114766 -0.0004710279 -0.0082788262 0.0105073495 -0.0002770010 -0.0084551685 0.0017687922 0.0042819854 0.0014043270 0.0458185683 -0.1109968307 0.0377414711 -0.0457939665 0.0135726326 0.0088461807 -0.0334700797 0.0518603502 0.0678079909 0.0505178943 -0.0901882918 0.1131271920 0.0221333232 0.0543319169 0.0613976267 0.0185684583 0.0346944202 -0.0092153364 -0.1695662267 0.1537766190 -0.0874383060 -0.1527722217 0.2177615806 0.0230616136 -0.0050355069 -0.0606196895 -0.0881947377 0.0003669521 0.2567930859 -0.0195155270 -0.0264396205 0.2093454545 -0.1428062134 -0.0032713384 -0.0031735119 0.0220110383 0.0140346724 0.0141520903 -0.0173255990 -0.0164160615 -0.0287372956 0.0032130848 0.0144066955 0.0125767402 -0.0174128907 -0.0074524601 -0.0014943950 0.0209600981 0.0163975984 0.0462015294 0.0077444329 0.0400953709 0.0723402051 -0.0558870788 -0.0060691124 -0.0097659252 0.0059288046 0.0662339522 0.0555481921 -0.0499961756 0.0362941598 0.0331320443 0.0109646264 0.0991672654 0.0321929389 -0.0769493589 -0.1187184565 -0.0229691066 -0.0245291076 0.0043219119 0.0027609693 0.0019625719 -0.0028710575 0.0064830614 -0.0006351426 0.0233387137 0.0211709526 -0.0554616966 -0.0146193274 0.0243137714 0.0353500949 0.0070122005 -0.0206353096 -0.0444568145 0.0432202464 -0.0438431905 0.0193949900 -0.0292189688 -0.0116408327 -0.0162464594 0.1030276695 -0.0191461069 0.0694180762 -0.0131170314 -0.0056292990 0.0454410684 -0.0644037362 -0.0206126486 -0.0135879373 0.0245738546 -0.0153594839 0.0249334917 -0.1057462346 0.0152575520 -0.0623854408 0.0161642466 -0.0016905855 -0.0151138742 -0.0085385368 0.0014800623 -0.0097415938 0.0141153416 -0.0049947294 -0.0056720023 0.0015636376 -0.0065103776 0.0169038734 -0.0015027959 -0.0029055126 0.0114372172 -0.0126905877 0.0041082041 0.0523641956 -0.0167068458 -0.0085948041 0.0024803397 -0.0025792734 -0.0070875937 -0.0188469005 -0.0181273639 -0.0086361925 0.0180336576 -0.0028589281 0.0059157823 -0.0309793153 0.0055367499 0.0085605140 0.0139212037 0.0067899710 0.0033796666 0.0069589539 0.0055649316 0.0049618205 0.0106300136 0.0158098093 0.0151229450 0.0198317177 -0.0113309414 0.0042116622 -0.0002445940 -0.0210972181 0.0123410000 0.0098065248 0.0115621053 -0.0076537036 -0.0068521710 -0.0309987456 -0.0064602011 -0.0195544701 -0.0165860145 0.0050941351 -0.0549830527 0.1085617964 0.0083840719 0.1254892576 0.0542904874 0.0240571789 0.0132135340 -0.0343368613 0.0157805232 0.0319526255 -0.0584436004 0.0207464029 -0.0366586545 0.0218411902 0.0205425898 -0.0105865705 -0.0106695307 0.0113781477 0.0429333432 -0.0040771216 0.0266191879 0.0082434252 0.0309133712 0.0246596725 -0.0569562239 -0.0245119723 0.0225255478 0.0928949205 0.0021975085 0.0197892289 0.0232909897 0.0230856457 0.0698763232 0.0318973498 -0.0005957594 -0.0377058005 -0.0036603400 0.0368883463 -0.0193524787 -0.0147188225 -0.0501911462 -0.0044645327 -0.0063504591 0.1163232575 0.1199133572 -0.2479714274 0.1764207999 0.0777217277 0.0546028682 0.0229813342 0.0471213105 0.0749383351 -0.0617171964 -0.0541435775 -0.0185981100 -0.0175020740 0.0660776051 0.1171540707 -0.0835935590 -0.0639913320 -0.0421051745 -0.0602188531 -0.1237893242 0.0095619573 -0.0416375179 0.0897596555 0.0449497522 0.0416297349 0.0128418169 0.1536439200 -0.0407758646 -0.0919983584 -0.1529221460 -0.0036621724 -0.1661923147 0.0423637615 0.0907947195 0.0314346934 -0.0945645553 0.1054092052 -0.0511234006 -0.0402453090 0.1692732461 -0.1380125102 -0.0657957823 -0.0965779536 0.0874546380 -0.0687700349 -0.0401643760 0.0950030309 0.0317824998 -0.0280085290 0.0292656283 -0.0044531785 -0.0644823723 -0.0081655824 0.0085032273 0.0226941708 -0.0624443551 0.0264094298 0.0647034023 -0.0344169880 0.0252357401 0.0312691786 -0.0875001648 0.0785952625 0.0185210172 -0.1065878553 0.0472154381 0.1495081542 -0.2079451996 0.0045242173 0.1726649769 -0.1983962336 0.0525970278 -0.0523979844 0.1125904228 0.0277971949 0.0787303098 0.0201490524 -0.0554506811 0.0918125693 0.0888517291 -0.0907396811 -0.0248835188 -0.0289206388 0.0227615046 0.0049302618 -0.0215549340 0.0061815829 0.0149710119 0.0039250003 0.0046397139 -0.0132547282 0.0112675776 0.0130625412 -0.0021604793 -0.0056943167 -0.0009445855 -0.0000719451 -0.0012803171 0.0020917780 -0.0034202745 0.0022260228 -0.0011904037 0.0022427895 -0.0014292154 -0.0024675239 0.0163342209 0.0173026936 0.0071837831 0.0012451008 -0.0013413337 -0.0005690744 0.0010564243 0.0060938136 -0.0004508979 -0.0013529300 -0.0017392347 0.0141539119 0.0003768430 0.0036632357 -0.0015772146 -0.0018645375 0.0016453311 0.0010002003 -0.0041681696 -0.0023300796 -0.0022625303 -0.0042999834 0.0025306247 0.0015101013 0.0004464632 -0.0019337557 0.0008502302 0.0016053154 -0.0039472042 -0.0009882768 0.0045451261 -0.0054396007 -0.0046495330 -0.0141457809 -0.0043718581 0.0079662964 -0.0140265933 -0.0062096878 0.0074652978 0.0115414512 -0.0152846649 -0.0220525617 0.0330479544 -0.0819650248 0.0297069721 -0.0301678075 0.0071044747 0.0074324710 -0.0246778608 0.0406797788 0.0427252773 0.0358820232 -0.0676373736 0.0792727401 0.0103712315 0.0365033081 0.0423264230 0.0087989867 0.0212803466 -0.0051179601 -0.1168989317 0.1092922402 -0.0613087042 -0.1058021001 0.1595634341 0.0072035585 -0.0005176771 -0.0429117106 -0.0584251832 -0.0105671520 0.1829474222 -0.0187586423 -0.0279664960 0.1493298760 -0.0996937110 0.0021528930 -0.0098461383 0.0182903171 0.0217322178 0.0153224709 -0.0081428186 -0.0164781751 -0.0309593800 0.0134364403 0.0160581010 0.0163727935 -0.0087699556 -0.0077041261 -0.0066005595 0.0151885423 0.0353573434 0.0373527682 -0.0026338506 0.0628114804 0.0778171790 -0.0422350457 -0.0089156607 -0.0126822236 -0.0021125380 0.0653919928 0.0767651755 -0.0420385910 0.0362391011 0.0397381706 -0.0056392338 0.0667675534 0.0228446685 -0.0523996319 -0.0775110202 -0.0133609479 -0.0171597052 -0.0068977115 0.0085941370 -0.0041352847 0.0035715432 0.0014700118 -0.0045108034 0.0244156633 0.0153264837 -0.0422980590 -0.0212836686 0.0208949192 0.0279035333 0.0174327944 -0.0192708051 -0.0364769824 0.0424431681 -0.0408306665 0.0020799559 -0.0133754935 -0.0117757261 -0.0121337539 0.0879595602 -0.0166373453 0.0316641591 -0.0193001167 -0.0122246953 0.0354028979 -0.0496682879 -0.0207346297 -0.0044387555 0.0152766662 -0.0210870960 0.0176034033 -0.0801308726 0.0204222605 -0.0303768859 0.0257275834 -0.0045830999 -0.0197927145 -0.0138924142 0.0006073849 -0.0072713749 0.0214502660 -0.0128363805 -0.0080106212 -0.0015175772 -0.0082731289 0.0272514779 0.0013694952 -0.0103254333 0.0126826675 -0.0207244171 0.0126106327 0.0833653036 -0.0289556866 -0.0089121944 0.0079524081 -0.0048025417 -0.0089172539 -0.0344521363 -0.0337608529 -0.0088724608 0.0313104317 0.0000030600 0.0082115302 -0.0602814239 0.0003806244 -0.0042624968 -0.0077209280 -0.0051521031 -0.0043330603 -0.0227716508 0.0129859116 0.0103934255 -0.0001521582 -0.0023935056 -0.0015318490 -0.0149491565 -0.0045887774 -0.0120263122 0.0066807030 -0.0114720583 -0.0328680906 -0.0123911450 -0.0271654665 0.0199855153 0.0017315943 0.0214792035 0.0068608532 0.0237028241 -0.0091306108 0.0124300723 -0.0150137084 0.0113293113 0.0024798244 0.0551256636 0.0027485510 0.0054793713 0.0154088136 -0.0011020806 0.0036768488 0.0112244671 -0.0062337402 0.0062105866 -0.0030516396 -0.0110807401 0.0011704751 0.0076360985 -0.0082051005 0.0026762725 0.0085726895 0.0019353137 -0.0039321909 -0.0096660507 -0.0041059114 -0.0017507506 0.0011428215 0.0086444116 -0.0034601920 -0.0262625985 -0.0080472541 0.0116943374 -0.0152248816 -0.0076488430 -0.0043523173 0.0113369599 0.0153331231 -0.0066014801 -0.0007575732 0.0007398492 -0.0139507320 -0.0110025154 -0.0158937672 0.0114970659 0.0089085116 0.1325371052 -0.1084947297 0.0024475749 -0.3861274951 0.3305001430 -0.2663314179 -0.1717616020 0.0920128352 -0.1029692989 -0.0982058023 0.1055971322 -0.0759234720 0.0612900175 -0.1031914519 0.0863905511 0.1398563675 -0.1817622051 0.0730911913 -0.0876665793 0.0823733799 -0.1038435912 0.1110759965 -0.0636466127 0.0713955094 0.0101364971 -0.0781752707 0.0488481891 0.3011966790 -0.3185830791 0.2098483541 -0.1185156812 0.1239094128 -0.1149397664 0.0778667685 -0.0412988492 0.0556096716 0.0918958032 0.0599563434 0.0269266355 0.0961609575 0.0813027838 -0.0202224376 -0.0324719859 0.0123390531 0.0348476516 0.0044825754 0.0092958622 -0.0417801184 -0.0527356245 -0.0279231886 0.0044667592 -0.0173014791 -0.0016640304 0.0030926676 0.0296823926 0.0056330430 -0.0105739944 -0.0061362133 -0.0156884365 -0.0000836890 -0.0327640813 -0.0495437586 0.0008523229 -0.0265929901 -0.0565112179 -0.0422264309 0.0483806914 -0.0218699097 -0.0043256654 0.0380182227 -0.0130064074 0.0522297820 0.0033302067 0.0060064062 -0.0407952389 -0.0228987600 0.0665755096 -0.0055679250 0.0384730943 0.0632548002 -0.0230648583 -0.0016269080 -0.0014974461 0.0013668423 -0.0050366077 -0.0307561522 -0.0234954299 0.0250880312 0.0222708508 0.0022545230 -0.0336162503 0.0188653081 0.0344107689 -0.0022105508 -0.0071441881 -0.0013849338 0.0005926259 -0.0082978737 0.0095115797 -0.0130652795 -0.0013412922 -0.0063841506 0.0082796498 -0.0043717509 -0.0077399642 0.0402531307 0.0409854330 0.0189810055 -0.0009446937 0.0000462791 0.0008309637 0.0031012327 0.0097023161 0.0044892178 0.0033776045 -0.0096992970 0.0385026672 0.0000970789 0.0081243760 0.0018539155 -0.0047238632 0.0041506708 0.0000275873 -0.0203238247 0.0002359284 -0.0060345406 -0.0244819463 0.0020145355 -0.0040521158 0.0000614638 -0.0046389895 0.0000615619 0.0089450558 -0.0119603002 -0.0090742318 0.0114992115 -0.0133123097 -0.0128278145 -0.0330890343 -0.0076770384 0.0133331856 -0.0363184178 -0.0070699244 0.0200271508 0.0231689161 -0.0320414923 -0.0534532668 -0.0026174714 0.0106416123 -0.0016136096 0.0014623893 0.0000570666 0.0046974147 0.0028653762 -0.0102370283 0.0006260081 0.0006063784 0.0009962642 -0.0033709997 0.0017810064 0.0046957002 -0.0068530434 0.0084757754 -0.0022383397 0.0067004244 0.0060979880 0.0033863261 0.0054203439 -0.0021770730 0.0042452788 -0.0098750964 -0.0023954359 0.0019702186 0.0015707123 -0.0023918531 0.0050897582 -0.0088344310 0.0115350921 -0.0136008582 0.0153920696 0.0018976148 -0.0012919108 0.0020424205 0.0028459781 -0.0003051546 -0.0001508174 0.0009709205 -0.0021526873 0.0004837045 0.0024576408 -0.0007922392 -0.0005990700 0.0010525386 -0.0019032421 0.0008028909 0.0039097692 -0.0004876486 0.0009579071 0.0037285032 0.0019607063 -0.0016824612 -0.0010184006 -0.0002495418 0.0000349743 0.0041812104 0.0003236191 -0.0016785807 0.0031147326 -0.0010826803 0.0012631852 -0.0032954399 -0.0020446563 0.0025252534 0.0005202884 -0.0010178217 0.0015678603 -0.0014379970 0.0014565558 0.0002275090 -0.0016330224 0.0009333209 -0.0010365243 -0.0064197619 0.0006496751 -0.0119765417 -0.0051161119 -0.0002341503 0.0034700578 0.0038550750 0.0023416014 -0.0093798379 0.0138061131 -0.0041550783 0.0015148310 0.0094468925 0.0011055655 0.0008212147 0.0244701022 -0.0066827895 0.0209037645 0.0015673744 -0.0093017792 0.0094542564 -0.0026979522 -0.0016913385 -0.0108656628 0.0090532243 -0.0107394192 0.0164431371 -0.0101911919 0.0098992707 -0.0162698984 0.0066368998 -0.0005673810 -0.0139736308 -0.0051056700 -0.0018198135 0.0073605770 0.0091879104 0.0012653051 -0.0119049199 -0.0067475686 0.0011631423 0.0181769288 0.0055980430 0.0018327885 -0.0033550624 -0.0269890628 0.0019789886 0.0501872256 -0.0075129222 -0.0027392378 0.0147308067 0.0129173789 -0.0012603011 -0.0165903344 -0.0123101257 -0.0023441556 0.0211722508 0.0247184429 0.0001270443 -0.0399831376 -0.0228996596 -0.0334918328 -0.0564583891 -0.0365849054 -0.0253234822 -0.0733936394 0.0036053571 -0.0236309627 -0.0599386133 -0.0225480713 -0.0407541828 -0.0468277001 -0.0150485975 -0.0030782377 0.0101471313 0.0043238234 0.0264009057 0.0346801062 -0.0711965223 -0.0234009891 0.0533363259 0.0263624616 0.0275837799 0.0286700199 -0.0413321655 0.0171134620 -0.0477913369 0.1054257493 -0.0005900247 0.2147023566 0.0347811229 0.0195899840 0.0607826826 -0.0813919064 0.0090765718 -0.0113865152 -0.0905440788 0.0041028206 -0.0512749196 -0.0986731905 0.0015899483 0.0641877530 -0.0946019102 -0.0036894216 0.0286379827 0.0376618977 -0.0465225953 -0.0706853658 -0.0413552733 -0.0231792082 0.0504622774 0.1094179947 -0.0403101391 -0.2543000805 -0.0211264563 0.0139240680 -0.1192925293 -0.0317229094 -0.0176608995 0.1009002327 0.1184777835 0.0020995216 0.0069656806 -0.0390685086 -0.0769637986 -0.0393114932 -0.0085294722 0.0763478167 0.0540997401 -0.0262830638 0.0400770776 0.0203465030 0.0813670872 -0.0629897179 0.0110804872 0.0208924405 -0.0478079740 0.0010945930 0.0267779753 -0.0117178593 0.0305949032 -0.0403820369 0.0065187358 0.0092603531 -0.0392157000 0.0019289715 -0.0376406950 0.0315343584 -0.0231832735 -0.0119900193 -0.0142340724 0.0228029727 0.0026112919 -0.0438544522 0.0139153092 0.0080483996 -0.0909643275 0.0428137648 -0.0445430525 0.0208601404 -0.0229751631 -0.0191492396 -0.0175394574 0.0225691033 0.0092693165 -0.0240097057 0.0288931634 0.0052389108 -0.0265382897 0.0252980921 0.0169997396 0.0340413397 -0.0347725741 0.0241534240 0.0160721750 -0.0393818069 -0.0052985165 0.0122548570 -0.0138426918 0.0128035718 0.0206680940 0.0044755808 -0.0119699030 -0.0184039467 0.0192656955 -0.0169844093 -0.0324959704 0.0171767480 0.0032182366 -0.0079217532 0.0243874856 -0.0137686374 0.0100606719 0.0260354972 -0.0168063667 -0.0608021518 0.0683211016 -0.0101608470 -0.0757447026 0.0818602660 -0.0078952847 0.0386781876 -0.0468972099 -0.0037190629 0.0178509520 0.0060371872 -0.0159788578 -0.0070176555 0.0286032252 -0.0104334378 -0.0052130415 -0.0071017617 -0.0043268862 -0.0000337159 0.0054494682 -0.0090702933 -0.0026074063 -0.0000063116 -0.0021742661 -0.0005758996 -0.0046462977 0.0013358925 0.0000391130 0.0010982875 -0.0001103265 -0.0005141295 0.0018976135 -0.0031429179 0.0032817668 0.0013242747 0.0005115849 -0.0031076385 0.0020225684 0.0027805767 -0.0021353492 -0.0014203226 0.0013985155 -0.0030376182 0.0011271610 0.0021933398 0.0015364669 -0.0002033848 0.0001013889 0.0008782505 0.0018732587 -0.0032175190 0.0010027731 0.0034664514 -0.0073057063 0.0054478411 -0.0000319348 0.0034342250 -0.0031999968 -0.0015816881 -0.0005608964 0.0024591297 0.0016026423 0.0066110200 -0.0032178842 0.0020868809 0.0029984262 -0.0034262072 0.0024205911 0.0033530880 -0.0030840721 0.0021954087 0.0029332422 -0.0019559722 0.0010554645 -0.0002738896 -0.0023577494 0.0022572949 0.0019693942 -0.0033602077 0.0015609067 0.0025959684 -0.0131693310 0.0342929972 -0.0001917661 0.0265016733 0.0087965990 -0.0000163364 0.0242101090 -0.0098020130 -0.0286611010 0.0003883089 0.0219763385 -0.0365704932 0.0085582341 -0.0089712433 -0.0217557689 0.0110711314 0.0105836758 0.0143912010 0.0792918557 -0.0080178874 0.0277635046 0.0622457556 -0.0510096131 -0.0252626691 -0.0036199268 0.0130077229 0.0245851463 0.0022784692 -0.0664993551 -0.0042917262 0.0166782184 -0.0308637771 0.0496440709 0.0067046301 -0.0089797060 -0.0012767192 0.0096638937 -0.0011383721 0.0092506505 0.0041736355 -0.0046499036 0.0089147794 0.0060676210 -0.0009606903 0.0062395068 0.0043401179 -0.0096930087 -0.0079319950 0.0215708460 -0.0184563616 -0.0079030122 0.0212678456 0.0022141751 0.0128224596 -0.0035840669 -0.0015539227 -0.0056461041 0.0006384759 0.0095249729 0.0078805635 -0.0001769180 -0.0071561533 -0.0120134506 -0.0403413629 -0.0117958742 0.0192127460 0.0184587519 0.0047876326 0.0146640105 -0.0118193784 0.0071213210 -0.0032370637 0.0001206510 -0.0009792622 -0.0054050652 -0.0147425377 0.0266379208 -0.0528502655 0.0073034603 0.0121428952 0.0841810559 -0.0084836492 0.0295269591 -0.0936142896 0.1042180550 -0.0404528797 0.0641602314 -0.0482544768 0.0381481851 -0.1101375700 0.1692131904 -0.0619321051 0.1922871208 0.0306009404 -0.0462116113 0.0754079365 -0.0434161054 -0.0161459633 -0.0963026759 0.0394117920 -0.0509326931 0.0208253395 -0.1590468806 0.0512223682 -0.2556189750 0.0021420411 -0.0106298936 -0.1085347102 -0.0145381773 -0.0227762974 0.0697807004 0.0383733929 0.0453025451 -0.1015683849 -0.0651440900 0.0390936188 0.1110666862 0.0443866488 0.0464874761 -0.0353132199 -0.2308865188 -0.0029418090 0.3108624530 -0.0119910799 -0.0155881617 0.1219330513 0.1393503329 0.0131099297 -0.0833501494 -0.0653409898 -0.0102459891 0.1455168233 0.2325158597 -0.0066840620 -0.2379893247 -0.0051546389 -0.0033293887 -0.0066745064 -0.0003188615 -0.0040325150 0.0050528090 -0.0138248307 -0.0110137806 -0.0097508318 -0.0059127129 -0.0060874340 -0.0045964533 0.0089325521 0.0035749518 -0.0010697161 0.0221684871 0.0018743697 -0.0053754220 0.0066432549 -0.0020546090 0.0030145044 0.0103363661 -0.0003857616 0.0108548390 0.0667620798 0.0104386553 0.1436484280 -0.1054165535 0.0546782199 -0.1390908798 -0.0072522287 0.0282166818 0.0061110640 -0.0566234092 0.0443773668 -0.1854295329 0.0085839252 0.0419139377 0.0042028607 -0.0127131305 0.0476095586 0.0196899395 0.0433438583 0.0267351369 -0.1743565444 0.0332141429 0.0157801351 0.0044378194 -0.0539419210 0.0260882835 0.1504100897 0.1484927232 0.0170644531 -0.1610077661 0.0351293276 -0.0379351749 0.0029949826 -0.0450122901 -0.0218348623 0.0219454216 0.0098195802 0.0014853853 -0.0010481405 -0.0060574719 -0.0133342542 0.0050294734 -0.0030386417 -0.0007964426 0.0147037404 0.0106835349 -0.0000716675 -0.0043435641 -0.0046799865 0.0161019221 -0.0139654610 -0.0068274920 0.0008622375 -0.0034933772 -0.0052812373 0.0026188579 -0.0003754266 -0.0031932273 -0.0025509452 0.0127886681 -0.0001150645 -0.0145631084 -0.0031599933 -0.0044137202 -0.0033567230 -0.0084951433 0.0031223293 0.0028724298 0.0075775693 -0.0049132228 -0.0008160770 0.0117696432 0.0046195548 -0.0186478177 -0.0002751593 -0.0076535547 -0.0016479897 -0.0102829236 0.0059451080 0.0039643638 0.0003579276 0.0074268990 0.0077039638 0.0010294922 0.0095732295 0.0062302586 -0.0024113038 -0.0010770702 -0.0014918618 0.0036807496 0.0018406053 -0.0011660521 -0.0029237500 -0.0039228791 -0.0034418503 0.0009058682 -0.0015497423 -0.0001204322 0.0001370861 0.0013612399 0.0019052933 -0.0013888308 -0.0017378942 0.0003031665 -0.0000691807 -0.0040771547 -0.0028499628 0.0000425519 -0.0026110778 -0.0041922271 -0.0038534778 0.0016462189 0.0015565104 -0.0015043055 -0.0008115703 0.0046490446 0.0036433955 0.0028706241 -0.0026015967 -0.0025364592 0.0049545649 0.0061843237 -0.0067090389 0.0076102600 0.0085016001 -0.0077438322 -0.0075549693 -0.0281863840 -0.0457040206 0.0001034386 -0.0013098962 -0.0016639513 0.0005383286 -0.0001631547 0.0000103184 -0.0013592265 -0.0003623445 0.0017986414 0.0000048859 0.0002711036 -0.0001304800 0.0003225271 0.0002124550 -0.0005491878 0.0005812542 0.0004254894 0.0000944979 -0.0003930943 0.0005036983 0.0003395979 0.0004689373 0.0009408606 0.0006386476 -0.0005948278 0.0002223107 0.0005531650 -0.0000343400 0.0008406591 -0.0011959014 -0.0004618059 0.0002334848 0.0000681827 0.0004150628 0.0003322602 -0.0008149389 -0.0000005101 -0.0003533135 0.0000301453 -0.0000140468 -0.0008770513 -0.0003307233 0.0016830996 0.0000859705 0.0009625427 -0.0017308380 0.0005112308 0.0017072665 -0.0005287451 -0.0004256474 0.0006563784 0.0003655188 -0.0007585856 -0.0003550910 -0.0013324839 0.0000191244 0.0006362514 -0.0012558687 0.0000759377 0.0008999369 0.0000034113 -0.0005770497 -0.0006904716 -0.0009364308 -0.0308722578 -0.0419621865 -0.0307602683 -0.0131260616 -0.0475326186 -0.0100211038 0.0030724261 0.0684551420 0.0003812029 0.0040050166 0.0567059467 0.0054889776 0.0049218926 0.0601411858 -0.0285272744 -0.0118631979 -0.0623829457 -0.1083538092 -0.0397512227 -0.0724909775 -0.0710203431 0.0113263290 0.1153819634 -0.0034494752 -0.0064763864 -0.0420428995 0.0718642644 0.0441486091 0.0770390668 0.0067563711 0.0043128673 -0.1101277866 0.0163024410 -0.0274312420 -0.0474872223 0.0199720897 0.0059045028 0.0607210806 0.0067251554 0.0049208511 0.0531693211 0.0052981555 0.0084759557 0.0559834147 0.0172810320 -0.0253087610 -0.0614787076 0.0745563588 -0.0815117942 -0.0723382946 0.0862366819 -0.0065834380 0.1092770243 -0.0038305326 -0.0091492450 -0.0379779330 -0.0501052469 0.0648414479 0.0790902964 -0.0215143562 -0.0000688582 -0.1060469913 0.0569931697 0.0120814023 -0.0323243684 -0.0402732654 -0.0138270159 -0.0171926971 -0.0514221408 0.0258064250 -0.0260400061 0.0296220617 -0.0227645162 -0.0184535035 -0.0042294611 -0.0095519871 -0.0014800412 0.0625008834 -0.0290065896 0.1067661675 -0.0531696891 0.0009314488 -0.0937664364 0.0635510350 -0.0024034153 0.1236255305 -0.1019947690 0.0102978333 -0.2074904910 0.1279926129 -0.0039543589 0.2206616988 0.0348154689 -0.0102869959 0.0788149118 -0.0650379273 0.0195191902 -0.0949105814 -0.0475836934 0.0035958899 -0.0146712238 -0.2118505835 0.0438800842 -0.3375930344 -0.0710616501 -0.0170798059 0.0854196077 0.0061796882 -0.0192752333 0.0127469443 -0.0346055403 0.0041012857 0.0564346274 0.0464624340 0.0132872608 -0.0838446150 0.0498273446 -0.0061340722 -0.0160330069 0.1600078967 -0.0114802670 -0.2886372533 0.0515834544 -0.0096592054 -0.0728816592 -0.0360319376 0.0232303330 0.1108441504 0.0814773445 -0.0116993265 -0.1836824493 -0.0801779165 0.0268710688 0.1898037260 -0.0014456768 -0.0016736981 -0.0030421497 -0.0019227252 -0.0008925188 -0.0026737022 -0.0007701879 -0.0012367623 -0.0029402979 -0.0022446833 -0.0025612927 -0.0030069800 0.0006898244 -0.0004248150 0.0002141729 0.0031311471 0.0001227757 0.0002287202 -0.0025094004 -0.0013067541 0.0025183839 0.0028835425 0.0004630543 0.0028895849 -0.0859974628 -0.0121508289 0.0198863809 -0.1088310195 -0.0249508906 0.0508144734 -0.1089115209 -0.0252139822 0.0452724355 -0.0341581222 -0.0808618627 -0.0158253138 -0.0607702599 -0.0284883729 0.0070513486 0.0418648176 -0.0248453399 0.0108669767 -0.0334953853 -0.0826015920 0.0006489098 0.1457380855 -0.0746494257 0.0642508877 0.1120762952 -0.0178351314 0.0109098513 0.1763227995 -0.0787466984 0.0907238548 0.0362669687 -0.0105656248 0.0307441152 -0.0073490012 0.0212763958 0.0356508864 0.0015183129 0.0043241246 -0.0155100776 0.0066549332 -0.0095211362 0.0073077732 -0.0153835739 -0.0083403660 0.0078152194 -0.0126412962 -0.0482603416 -0.0314833760 -0.0875475053 0.0802101010 0.0606408679 0.0217232124 0.1175544191 0.0333120490 -0.0456139632 -0.0235427194 -0.0245813491 0.0955755295 0.0305611892 -0.0549741146 0.0778807612 0.0758546661 0.0800070681 -0.0843288673 0.0295977072 0.0873754793 -0.0145650362 -0.0633509793 -0.0190381942 0.1120823875 0.0531798937 -0.0316421691 0.1662781632 0.0114164293 0.0150028784 -0.0716178316 0.0095763415 0.0893423805 -0.0058491468 -0.0635809071 -0.0303241582 -0.0095377337 -0.0692430723 -0.0494901593 -0.0163197826 -0.0608161677 -0.0447326150 -0.0121956490 0.0181533647 -0.0670954604 -0.0194179166 0.0331224430 0.0593068469 0.0353178655 0.0404019290 -0.0065461316 -0.0245398346 -0.0029660674 -0.0050900091 -0.0247868830 -0.0366756923 0.0165206117 0.0353626292 0.0039633545 0.0117569257 0.0430932713 0.0036597136 0.0422251405 0.0243194926 -0.0023047271 0.0529519272 0.0218924902 -0.0801295728 -0.0085011136 0.0425498156 -0.0767151708 -0.0274132745 -0.0132150271 0.0371110781 0.0581823074 -0.0425446344 -0.0639196291 -0.0459431560 -0.0527168467 -0.0175636357 -0.0667740149 -0.0097371990 -0.0459860766 0.0155175749 0.0166656665 -0.0121839543 -0.0046784350 0.0097489164 -0.0100206630 0.0019842949 -0.0114950692 -0.0033517607 0.0075046295 -0.0001529591 -0.0006564414 0.0002656919 -0.0010574569 0.0019001204 -0.0084113282 0.0062434815 0.0029527514 0.0025802827 -0.0049613639 0.0033260896 0.0041889432 -0.0003841732 0.0093196209 0.0056130794 -0.0096553739 0.0026371301 0.0089337079 -0.0011582790 0.0047072053 -0.0099595032 0.0014434666 0.0017835610 -0.0038728908 -0.0014288702 0.0076871607 -0.0110167188 0.0052127534 -0.0008702223 0.0045722384 0.0042114657 -0.0021936307 0.0011841880 0.0154189426 0.0002756515 0.0069359079 -0.0065784306 0.0029634341 0.0077430108 -0.0063323292 0.0020512956 0.0072007689 -0.0022543349 0.0006502735 0.0028906659 -0.0180664874 0.0006245394 0.0123420620 -0.0146997715 0.0004008953 0.0114731555 -0.0033377238 -0.0060506678 -0.0015896218 -0.0054919819 -0.0303673839 0.0148322916 0.0479039900 -0.0080840067 -0.0344769181 0.0481935985 0.0182888111 -0.0288837556 0.0650958743 -0.0080383004 0.0035088513 0.0707003267 0.0380091449 -0.0072848656 0.0708167076 0.0345870289 0.0038873613 0.0616874399 0.0637691831 -0.0504713202 0.0121316224 0.0681043576 -0.0442525258 -0.0116284623 -0.0129785241 -0.0054304738 0.0534774749 0.0825372252 -0.0298485547 0.0953334099 0.0759190190 -0.0597524866 -0.0644128880 -0.0042628329 -0.0357361488 -0.0391223272 0.0465078756 -0.0359947185 -0.0811616255 0.0004148213 0.0106344484 -0.0624102235 0.0783186811 -0.0103387410 -0.0844264388 0.0453409740 0.0152180058 -0.0438878431 0.0985945653 -0.0546707986 0.0418813983 0.1260101503 -0.0657669244 0.0081364873 -0.0246055282 -0.0043002554 -0.0069421400 0.1641997276 -0.0480212022 -0.0888343626 0.1298679882 -0.0678656012 -0.0449967119 -0.0137931426 -0.0170528206 -0.0602223511 -0.0104204433 0.0303124527 0.0463900298 -0.0305305140 -0.0212935025 0.0674549145 -0.0290733930 0.0288739027 -0.0852371846 0.0040048834 0.0680884153 0.0376982827 -0.0420274151 0.0049475464 -0.0369235860 0.1189916691 0.0168828871 0.0054522238 0.0596827577 0.0229959945 -0.0010277202 0.1093006975 -0.0569905984 -0.0993120603 -0.0643563504 0.0593866677 0.0806448750 -0.0509985172 -0.0459149551 0.1417059333 0.0200419112 -0.0900237093 0.0027215727 -0.0324157253 -0.0527991853 0.1224964230 -0.0038016735 -0.1417065523 -0.0602042287 -0.0523044876 -0.0194015348 0.1126765448 -0.0531245501 0.0876232121 -0.1091247900 -0.0335437640 -0.0758667877 -0.1794232617 0.0980354177 -0.0964380852 -0.0053170284 -0.0417573717 -0.0487883374 -0.1979658398 0.0670652864 -0.1094206143 0.0825331656 0.1238512386 0.0435878094 0.0381631762 0.0841574238 0.0108893363 -0.0015274187 0.1320222750 -0.0325727930 0.1217374261 -0.1098218667 0.0395123405 -0.0022909100 -0.0083329317 -0.0053847002 -0.0037024309 0.0024042720 0.0124052723 -0.0110155027 -0.0089258174 -0.0016951051 -0.0205285910 -0.0190908034 -0.0172869714 0.0140666355 0.0170584450 -0.0060470338 -0.0053705575 0.0220764810 0.0027464516 0.0073556167 0.0180957207 -0.0024035902 0.0275136005 0.0324134879 -0.0126564882 -0.0507430333 0.0214757221 0.0052487623 -0.0937547381 0.0086512593 0.0539367299 -0.0729253437 0.0041831383 0.0294558662 0.0170071042 -0.0408964997 0.0159904917 -0.0148165376 0.0079605499 0.0088550652 0.0381793487 -0.0224753851 -0.0066053550 0.0161410733 -0.0399660402 -0.0086138872 0.0631568854 -0.0403590647 0.0448858335 0.0682084928 -0.0150261148 -0.0176685881 0.0530924397 -0.0429776795 0.0979821793 0.0000512874 0.0077719970 0.0578681760 -0.0111666477 0.0250884535 -0.0079905258 -0.0253425775 -0.0223483864 -0.0129416067 0.0376946218 0.0007424893 -0.0008876263 -0.0208284125 -0.0140704840 -0.0269365686 0.0365255269 0.0960853840 0.0368243918 0.1567832476 -0.1298243839 -0.1092620286 -0.0408498066 -0.2030056353 -0.0561117878 0.0782484370 0.0417814281 0.0393911269 -0.1681884077 -0.0520151979 0.1054057129 -0.1397690291 -0.1414271532 -0.1415183904 0.1456431456 -0.0556025312 -0.1566564401 0.0271845526 0.1156637415 0.0377745779 -0.1970598252 -0.0947874080 0.0636735526 -0.2897709000 -0.0324054734 -0.0272552256 0.1310118854 -0.0247143246 -0.1545929554 0.0255247525 0.1175702189 0.0453572946 0.0333864315 0.1172007163 0.0865747697 0.0538925262 0.0913829193 0.0738879488 0.0083849190 -0.0240544801 0.1148978115 0.0320398131 -0.0471776601 -0.1059972203 -0.0735799156 -0.0714286454 0.0078501036 0.0339988601 0.0043909232 0.0142678664 0.0526447195 0.0619413903 -0.0236115481 -0.0537457067 -0.0114558366 -0.0227410972 -0.0779548090 -0.0235297914 -0.0672265265 -0.0462693768 -0.0055772726 -0.0865493443 -0.0152335640 0.1232577255 0.0160022784 -0.0485280386 0.1126511608 0.0560294525 0.0143558803 -0.0568699171 -0.1031950482 0.0767721465 0.1154716553 0.0899507144 0.0828348945 0.0368898216 0.1258638600 -0.0001786523 -0.0178758838 0.0130354359 -0.0275871907 0.0173553908 0.0062052614 -0.0135250247 0.0192836174 -0.0037245186 0.0149086741 0.0080943930 -0.0102792265 -0.0012479353 -0.0021342312 -0.0001821683 -0.0003350438 -0.0042303834 0.0130401666 -0.0110259038 -0.0015751850 -0.0046604597 0.0082465823 -0.0067488381 -0.0077842143 0.0057804960 -0.0105298564 -0.0068568931 0.0160696253 -0.0045380473 -0.0145994002 0.0037197922 -0.0055599253 0.0179736444 -0.0040002390 -0.0041180392 0.0113570600 0.0024858698 -0.0096195354 0.0103060572 -0.0065600456 0.0052834905 -0.0055206610 -0.0116759815 0.0010959177 -0.0041290136 -0.0165149332 0.0001003316 -0.0041073911 0.0172059826 -0.0070365864 -0.0163588470 0.0090553569 -0.0006662076 -0.0093055277 0.0048575385 0.0005749154 -0.0039064212 0.0261256477 -0.0021013146 -0.0184961658 0.0197693497 -0.0020885914 -0.0163593451 0.0086608421 0.0058274514 -0.0041902054 0.0095396836 -0.0460851034 0.0132563317 0.0231995441 -0.0191737861 -0.0174084710 0.0140768258 0.0304572287 -0.0084115697 0.0424154959 -0.0260926724 0.0258862952 0.0308595390 0.0378898023 0.0005762423 0.0392607978 0.0044115506 -0.0021649350 -0.0066589272 0.0517209927 -0.0520463619 -0.0404167087 0.1122890181 -0.0348980123 -0.0053274777 -0.0215276013 -0.0134947485 0.0122702675 0.1256582805 -0.0382372470 0.0405937235 0.0682202473 -0.0670465737 -0.0328048490 0.0028253189 -0.0129230787 -0.0240190973 0.0196508685 -0.0261805082 -0.0430363520 0.0032223978 -0.0030255824 -0.0383991696 0.0391609812 -0.0116337178 -0.0471201391 0.0329806249 0.0165323875 -0.0342876349 0.0613911833 -0.0170147217 0.0056566889 0.0561691902 -0.0442261841 0.0061016581 -0.0104233651 0.0008118633 -0.0068199510 0.0672664972 -0.0307859686 -0.0493742748 0.0697426963 -0.0199663939 -0.0092388183 -0.0005635730 -0.0172213283 -0.0438109830 -0.0055965166 0.0105862327 0.0304332895 -0.0199231302 -0.0090271033 0.0332867280 -0.0138103904 0.0177480200 -0.0530435315 -0.0107376570 0.0353183249 0.0122672398 -0.0350206122 -0.0189401171 -0.0096932482 0.0535800708 0.0267582502 -0.0115753202 0.0427930674 -0.0079220524 0.0377673085 0.0420443085 0.0059071727 -0.0727934011 -0.0190923930 -0.0032383216 0.0323615624 -0.0282180012 -0.0380564654 0.0897460417 0.0166569799 -0.0319150636 -0.0091062813 -0.0170258732 -0.0111105850 0.1079493242 -0.0000258767 -0.0115968187 -0.0222905360 -0.0211792036 0.0149720946 0.0602412892 -0.0186402368 0.0409445209 -0.0628532686 -0.0359897876 -0.0188848865 -0.0843290126 0.0385760163 -0.0711729644 -0.0107794285 -0.0404833662 -0.0261220291 -0.0537587598 0.0392429533 -0.1180370833 0.0455913128 0.0775409673 -0.0025595968 -0.0156247338 0.0386355756 0.0170278822 0.0245461928 0.0796081038 -0.0557467952 0.0173249942 -0.0654747933 0.0546010116 0.0019273544 0.0118762657 0.0046598383 0.0033968144 -0.0055691182 -0.0263666806 0.0186702596 0.0146269666 -0.0008799387 0.0317827007 0.0296557336 0.0238399798 -0.0236953845 -0.0306131515 0.0120600651 0.0135111934 -0.0407705851 -0.0052043113 -0.0193273267 -0.0277052371 0.0073655470 -0.0426893965 -0.0539752694 0.0265114643 -0.0993670271 -0.0094981487 0.0283382942 -0.2264989557 -0.0655924600 0.0548211403 -0.1857042223 -0.0752807419 0.0619683481 -0.0176731684 -0.0214707338 -0.0217258468 -0.0339661746 -0.0109708429 0.0046934664 -0.0055140350 0.0093244643 -0.0029252204 -0.0035041272 -0.0029909174 0.0096801991 -0.1257570865 0.1210715936 -0.0453721565 -0.0676912966 0.0298770906 -0.0192285556 -0.1732326226 0.1242346317 -0.0272345746 -0.0111284370 0.0163503228 -0.0193096460 -0.0230391037 0.0003549553 0.0375376751 0.0118957647 -0.0033700290 -0.0025365798 0.0016301968 -0.0115003785 -0.0026899127 -0.0071417351 0.0069477919 0.0017141506 -0.0042419997 0.0127425374 -0.0083309819 0.0030165993 -0.0015826840 0.0055976879 0.0034791330 0.0026360538 0.0025916115 0.0005570962 -0.0029276130 0.0015258503 0.0020672366 0.0026505407 -0.0024960403 0.0004229261 0.0051721036 0.0013172131 -0.0013315514 -0.0014575577 0.0050339770 -0.0024652861 -0.0015080460 -0.0009912583 0.0027124472 0.0043585607 -0.0013221378 0.0008283777 0.0052427792 -0.0033762339 0.0005771014 -0.0053392158 0.0057683321 -0.0005191992 -0.0006005949 -0.0022986436 -0.0025766713 -0.0064429392 -0.0011964721 -0.0005578839 -0.0122006301 0.0031887561 0.0000191593 0.0026161769 -0.0035633776 -0.0025090314 0.0007177537 0.0029880036 0.0031808557 0.0042528571 0.0013240502 0.0011714291 0.0013358166 -0.0032986323 -0.0029664388 -0.0039282016 -0.0010666891 -0.0004427852 -0.0005389442 0.0029868546 0.0069429962 -0.0011263996 0.0033431498 0.0066782715 0.0012404726 0.0025152962 -0.0007785847 -0.0072929184 0.0003448982 0.0008438067 -0.0080137332 -0.0000086144 0.0017660516 0.0015786072 0.0027039674 -0.0011331951 -0.0032593508 -0.0023325151 -0.0044315503 0.0017790054 -0.0032166874 0.0052175947 0.0369579976 -0.0110369877 0.0037619340 -0.0016255296 -0.0030738337 0.0013478970 -0.0021679341 -0.0002613641 -0.0026101221 -0.0021186177 0.0020251694 0.0001741347 0.0010894966 -0.0002261074 0.0002604222 0.0008036418 -0.0016147809 0.0022844029 -0.0010727638 0.0004084588 -0.0014191491 0.0014219869 0.0018268262 -0.0005519978 0.0014715766 0.0013024166 -0.0025465545 0.0007781209 0.0025644814 0.0000673705 0.0013298408 -0.0019476109 0.0012756790 0.0007092296 -0.0012223855 0.0000270395 0.0015606931 -0.0015511998 0.0055817564 0.0006341217 0.0031358964 0.0010456606 0.0016429097 0.0012907785 -0.0042677441 0.0008768968 -0.0006726661 -0.0053346767 0.0019980507 0.0034235643 -0.0005026103 -0.0009455519 -0.0004371600 -0.0026921524 0.0000889431 0.0010341571 -0.0037616188 0.0004208265 0.0028655330 -0.0033747714 0.0003391326 0.0029267522 -0.0014199982 -0.0007365529 0.0004895408 0.0015523612 -0.0661692137 0.0228365939 0.0523243124 -0.0303058118 -0.0406370397 0.0420980468 0.0405430385 -0.0313100355 0.0876291395 -0.0315132802 0.0272109284 0.0807684828 0.0626423423 -0.0055304480 0.0878439979 0.0280883208 -0.0002874102 0.0338269421 0.0849561118 -0.0838618527 -0.0379382098 0.1549279837 -0.0661621697 -0.0108224330 -0.0283992763 -0.0164394673 0.0499642895 0.1794744280 -0.0596093895 0.1083905692 0.1169937788 -0.1081869687 0.0453597688 0.0106790313 0.0266339473 0.0234255101 -0.0319634144 0.0284228328 0.0617634876 0.0012795986 -0.0091427860 0.0469829037 -0.0599164002 0.0084578040 0.0646309624 -0.0324461305 -0.0107191819 0.0283185672 -0.0643140976 0.0414665594 -0.0438397872 -0.0949904456 0.0501627419 -0.0042243865 0.0183411522 0.0041758303 0.0044716418 -0.1264547905 0.0374964071 0.0717951176 -0.0949646315 0.0527399747 -0.0398707806 -0.0104091730 -0.0293957570 -0.0819156731 -0.0125783683 0.0314062001 -0.0324738608 0.0215080290 0.0170357028 -0.0492909773 0.0210984331 -0.0205939876 -0.1414493766 -0.0141447186 0.1173105698 0.0121245536 -0.0639876632 0.0105562152 -0.0283527258 0.1918268088 0.0298005656 0.0295253355 0.0845218002 -0.0016840338 0.0386037577 0.1738217512 -0.0765426324 -0.1419642605 -0.1065571421 0.0392908864 0.0676692615 -0.1277769642 -0.0741068413 0.2208827126 0.0181770890 -0.1199145259 -0.0456574908 -0.0987199887 -0.0521190505 0.2050233215 0.0381039577 -0.1359733242 0.0167709188 0.0474204927 -0.0057421486 -0.1078758783 0.0556125054 -0.0961840139 0.0775326527 0.0912855464 0.0666727145 0.1699496980 -0.0714992123 0.0892061072 -0.0111341231 0.0971761028 0.0337888332 0.1580553140 -0.0941875463 0.0795055799 -0.0654157967 -0.1439889577 -0.0303574723 0.0041185540 -0.0731094637 0.0102190623 -0.0022389164 -0.1498290872 0.0488972390 -0.0801483495 0.1195951747 -0.0159821359 -0.0016555934 -0.0020282716 -0.0029176143 -0.0012730541 0.0007195913 0.0034876213 -0.0050263382 -0.0027938461 -0.0019945543 -0.0065627954 -0.0051164645 -0.0059175216 0.0056406467 0.0036452996 -0.0015471406 0.0042703334 0.0040253701 -0.0009467143 0.0018612222 0.0042837404 0.0003009634 0.0090614074 0.0064961594 -0.0006014675 -0.0049242975 0.0192072812 -0.0140478698 -0.0000452287 0.0162128013 0.0358233443 0.0016614039 0.0164719825 0.0060699214 0.0223915996 -0.0043451761 0.0158538227 0.0058397036 0.0124271859 0.0011758475 0.0058967929 -0.0163078344 -0.0027624517 0.0255956129 -0.0057346917 -0.0170885979 -0.0059717114 -0.0133173453 -0.0076611183 -0.0100969607 -0.0197681398 0.0129248966 -0.0106642408 -0.0109543904 -0.0380088324 -0.0127865034 0.0169468374 0.0042264624 -0.0179818380 -0.0107029697 -0.0011777516 0.0038536253 -0.0008433868 -0.0003869014 0.0024268264 -0.0014093584 -0.0020016419 0.0001369042 -0.0009793580 0.0035393721 -0.0797198422 0.2237746352 -0.1123125031 0.0208519436 -0.0484162442 -0.0149855367 0.0025729508 -0.0435772014 -0.0182524989 0.0210931870 0.0165741596 0.0264529819 -0.0335478017 -0.0085320966 0.0066208624 -0.0062155275 0.0090919704 -0.0176516806 0.0356401393 0.0140237241 -0.0168925842 -0.0013480228 -0.0018447080 0.0100615715 -0.0438558861 0.0143196108 0.0040669353 -0.0454647087 0.0377450806 0.0173111924 0.0178648699 0.0032291381 -0.0340099753 -0.0307010921 0.0348366971 -0.0048571104 -0.0429604822 -0.0914315015 0.0538688163 -0.0109966579 -0.2043751214 0.1618732183 0.0183244521 0.0447089709 0.0100453324 -0.0398143219 -0.0083709842 -0.0237074654 0.0307106982 0.0454850191 0.0314503350 0.0549338853 0.0343227798 -0.0531156037 -0.0196740195 -0.0406710673 -0.0365953717 -0.0389050129 -0.0342536979 0.0474575024 0.0721507504 0.0233477147 -0.0141319205 0.0861007249 0.0280884173 -0.0194291768 -0.0206559133 -0.0811346619 0.0378161403 -0.0221555720 -0.0861333127 0.0354492367 0.0217386443 0.0285291877 -0.0341705668 -0.0042496188 0.0102666344 0.0130809663 0.0995631583 -0.0902303229 0.0156438333 0.0083161565 0.0077047616 -0.0019897392 0.1231855876 -0.1079881712 -0.0929628105 0.0854918178 -0.0711880454 -0.0076811320 -0.1151672132 -0.0337608617 0.0716175788 0.0013211269 -0.0040463429 -0.0013537326 -0.0041589986 0.0211855876 -0.0750449040 0.0676837768 0.0030202469 0.0257507288 -0.0493589282 0.0366378019 0.0490150907 0.0178416959 0.0893500355 0.0570721354 -0.0793874055 0.0214422794 0.0760570417 -0.0119869695 0.0552011904 -0.1000009419 0.0118749213 0.0197323578 -0.0328029720 -0.0110886095 0.0641560197 -0.0860222689 0.0872423406 0.0078168742 0.0468428779 0.0560863175 0.0033867669 0.0270183029 0.0635259046 0.0048718206 0.0362304885 -0.0990293878 0.0408791743 0.0845448178 -0.0480698670 0.0057629416 0.0427840399 -0.0522275675 0.0121313315 0.0363910667 -0.1612012187 0.0015490622 0.1092286780 -0.1451335074 0.0025900125 0.1106667441 -0.0186550277 -0.0616660990 -0.0435039404 0.0054979642 -0.0112351554 0.0022033511 0.0000935698 -0.0071686414 0.0032609319 -0.0053320191 0.0110868098 0.0025270702 0.0028448608 -0.0122615542 0.0113010937 -0.0072904404 0.0078968412 0.0016760290 -0.0021042038 -0.0094071623 -0.0001880602 -0.0163049893 0.0067001963 -0.0081499792 -0.0196570669 0.0379248203 -0.0089284864 0.0022719160 -0.0060037259 -0.0036677739 -0.0144677967 0.0416253664 -0.0136015723 -0.0112408922 0.0108741967 -0.0124382865 0.0017102798 0.0083730433 -0.0046471731 -0.0099866007 -0.0080809694 -0.0007940025 0.0035019204 0.0120157412 -0.0082437645 -0.0091851549 -0.0055596456 0.0016167798 0.0021531355 0.0105663132 -0.0001053735 -0.0150562403 -0.0017387012 0.0047821505 -0.0300077639 -0.0329625301 0.0106949646 0.0028664498 0.0046241142 0.0013066392 -0.0243533620 -0.0355133266 0.0131730613 -0.0124839107 -0.0062782065 0.0082499706 0.0065245690 0.0029808550 -0.0032020599 -0.0028731273 0.0007349022 -0.0026895205 0.0042541685 -0.0046768105 0.0010215934 -0.0000274268 -0.0010399387 0.0030455504 0.0001847623 -0.0057425475 -0.0088049012 0.0014810797 -0.0061563872 -0.0110500777 0.0014603387 -0.0145529218 0.0052536597 -0.0101670636 0.0043412085 -0.0033409296 0.0152983037 -0.0175223463 0.0186381269 -0.0011349963 0.0137890838 -0.0047293713 -0.0018523135 0.0091281990 -0.0029401315 -0.0024508788 0.0049459669 0.0082102762 0.0019802351 0.0088536880 0.0129574195 0.0109716917 -0.0042133003 0.0258664586 0.0033826193 0.0066254831 0.0125339562 -0.0000758735 0.0078194502 0.0087802091 -0.0043346145 -0.0067476339 0.0033691188 -0.0020689850 -0.0053415533 -0.0080254668 -0.0014620301 -0.0071901274 -0.0147771586 0.0148553816 -0.0011236439 -0.0286884083 0.0059299459 0.0126981675 -0.0061730049 -0.0123438121 -0.0026381079 0.0043580011 0.0242496858 0.0110995416 -0.0212301846 -0.0070513723 -0.0129775995 0.0045207914 -0.0706225279 -0.0868043212 -0.1369035046 -0.0877381926 0.0109222433 0.0122214036 -0.1353551400 -0.0414539177 -0.0586661626 -0.2368807924 -0.1720108742 -0.2614532430 0.1511720382 0.1031991404 -0.0402615043 0.0627836428 0.1717676671 0.0447953465 -0.0013536645 0.1087914182 0.0456384505 0.3082194073 0.2615307877 -0.0535065177 0.0570858486 -0.1130541139 0.1302513260 -0.0296512460 -0.0660491571 -0.3042753435 -0.0023043020 -0.0780007702 -0.0601888766 -0.1194325733 0.0264021733 -0.0963912310 -0.0206422368 -0.0660045578 -0.0053973457 -0.0264210730 0.0873828942 0.0152650358 -0.1350481539 0.0342907744 0.0966803442 0.0231828239 0.0721866054 0.0664474715 0.0816052541 0.1137030986 -0.1271293882 0.0103729311 0.0569501207 0.3166360626 0.0571292173 -0.1246404887 0.0477437006 0.1006552904 0.0869251202 -0.0603283711 -0.0574483132 0.0024925091 -0.0010159589 0.0025746269 0.0301440611 0.0249773130 0.0059121628 -0.0220621467 -0.0342852876 -0.0168126077 0.0472126583 -0.0219385239 0.0059247468 -0.0203267650 -0.0149806382 -0.0065525966 -0.0261515419 -0.0106271962 0.0102898934 0.0112905400 0.0029582578 -0.0189138659 -0.0083293524 0.0057159423 -0.0088704323 -0.0104564029 -0.0115906349 0.0176117202 0.0080607254 -0.0204390266 0.0097510542 0.0051659575 0.0044861658 -0.0289932087 -0.0072030652 -0.0031964469 -0.0254617600 0.0008096806 0.0139486631 0.0163583527 0.0114224630 -0.0205255190 -0.0070214655 0.0138063993 0.0028616307 -0.0044094827 -0.0119844768 0.0239055764 0.0020434005 -0.0349728610 0.0464199186 -0.0032490075 0.0055168043 0.0166055541 -0.0005719882 0.0022487045 -0.0211903848 -0.0142415925 -0.0064322147 -0.0059445749 0.0042040839 0.0050469844 0.0087521917 0.0188936159 0.0083151914 0.0047888309 0.0008851957 -0.0090915115 -0.0100019827 -0.0093536511 -0.0058858988 -0.0165987624 -0.0123645465 0.0024058159 -0.0096024912 0.0159322824 0.0051179803 0.0167564597 0.0137877222 -0.0059641800 0.0062959774 -0.0168848722 0.0001984840 -0.0204303676 0.0020198226 0.0151862650 0.0223423098 0.0464621745 -0.0368495057 0.0251876406 -0.0418121324 -0.0340998551 0.0233840427 0.0260592885 -0.0246499402 -0.0193942103 0.0192155150 -0.0149238293 -0.0022034270 -0.0257229820 -0.0059011236 0.0147691675 -0.0000800583 -0.0014894351 -0.0001973204 0.0001861344 0.0032453629 -0.0148075603 0.0129182841 0.0017342865 0.0067235001 -0.0091312630 0.0064081767 0.0083008986 0.0049832785 0.0199560103 0.0122895105 -0.0163613004 0.0043116321 0.0159485880 -0.0051503538 0.0124676315 -0.0252096915 0.0024920923 0.0029042248 -0.0022121204 -0.0040842935 0.0151979734 -0.0127207567 0.0089135754 0.0013037932 0.0017374054 0.0166503275 -0.0049285459 0.0048258180 0.0232770108 -0.0009342278 0.0101024654 -0.0152949976 0.0063334541 0.0154119994 -0.0106531310 0.0023412046 0.0114265851 -0.0062172894 0.0011630984 0.0056951392 -0.0346907355 -0.0000708431 0.0239542052 -0.0315631295 0.0000306094 0.0239840323 -0.0029378286 -0.0140626482 -0.0110082903 -0.0360050153 0.0612800169 -0.0247948837 -0.0021222259 0.0390819544 -0.0340281777 0.0381738657 -0.0680602624 0.0026164337 -0.0199386744 0.0758713305 -0.0578730885 0.0265451442 -0.0471085780 0.0073475959 -0.0115478880 0.0419142661 -0.0133587456 0.0743528860 -0.0585132569 0.0294859251 0.1137463467 -0.2295950080 0.0812545434 -0.0077449321 0.0388503440 0.0160555161 0.0878695986 -0.2512314126 0.1077654817 0.0581310174 -0.0939592294 0.0624696071 -0.0020622922 -0.0495202336 0.0508816329 0.0652095189 0.0341049029 -0.0121160846 -0.0258760086 -0.0738294488 0.0351398140 0.0396452181 0.0380084540 -0.0294803897 -0.0300271378 -0.0441389819 0.0224356892 0.0800655285 0.0259561151 0.0024283798 0.1712324177 0.1897313322 -0.0945843631 -0.0181726961 -0.0265320278 -0.0028138725 0.1508407866 0.2051774135 -0.1081729863 0.0680755915 0.0532344354 -0.0192473737 -0.0303356689 -0.0174395529 0.0156949308 0.0182661345 -0.0032688917 0.0132765975 -0.0197953947 0.0211590275 -0.0048289715 -0.0018947796 0.0067931463 -0.0155362829 0.0191392539 0.0267930640 0.0450952436 -0.0096682606 0.0375116071 0.0511750706 0.0025620741 0.0511291552 -0.0176494395 0.0416905787 -0.0295091271 0.0050361563 -0.0760583638 0.0683258900 -0.0805624727 -0.0005801336 -0.0536992276 -0.0191401698 -0.0050863023 -0.0314614260 0.0109361121 -0.0032934958 -0.0279948998 -0.0158864301 -0.0195247989 -0.0316584012 -0.0788720232 -0.0615566004 0.0151879989 -0.0901721459 -0.0189256595 -0.0352746543 -0.0573981399 0.0079063461 -0.0410810936 -0.0550373879 0.0128227760 0.0310884282 -0.0028388108 0.0173244276 0.0269016464 0.0230326954 -0.0044316509 0.0336019501 0.0932205717 -0.0532197647 0.0068732171 0.1061264164 -0.0224910758 -0.0630426360 0.0150663939 0.0509204451 0.0158413012 -0.0071284923 -0.1165505164 -0.0548848894 0.0897057143 0.0088351540 0.0684167235 0.0202752652 -0.0155452250 -0.0185187465 -0.0304566732 -0.0206962109 0.0030735085 -0.0011995922 -0.0271921335 -0.0051379639 -0.0111158936 -0.0517387698 -0.0359739482 -0.0588412088 0.0311937825 0.0203118671 -0.0079956476 0.0116766018 0.0374914228 0.0129142387 -0.0049813207 0.0228403728 0.0116951615 0.0658767508 0.0565001867 -0.0136078610 -0.0122053922 -0.0007692087 -0.0306307021 0.0362904612 -0.0098610677 0.0486587328 0.0105048829 -0.0028529687 0.0081257599 0.0066542731 -0.0090473750 0.0158989404 -0.0027099620 -0.0042667329 0.0070038373 0.0077842505 -0.0036276291 -0.0094263919 0.0093528624 -0.0078455744 -0.0152757477 0.0069526589 0.0061666387 -0.0111457505 -0.0087232666 -0.0022962735 0.0309076083 0.0261849001 0.0072925909 -0.0526552133 0.0028251153 0.0127593136 -0.0218433517 -0.0027645491 -0.0077239006 0.0250826502 0.0049609304 0.0020063574 0.0003533403 -0.0038279769 -0.0015926464 -0.0031955944 0.0005178920 0.0039219157 -0.0000021224 -0.0991246482 0.0679110349 -0.0264994435 -0.0077374838 -0.0354282408 0.0348887924 0.0184477131 -0.0053352446 0.0141483790 0.0125953545 -0.0143970101 0.0019176878 0.0071897999 0.0093548673 -0.0402024534 -0.0008528531 0.0365359647 0.0103830793 0.0067235842 0.0051245919 0.0240086340 0.0138921766 -0.0188474474 -0.0155063635 -0.0225741730 0.0255695212 -0.0610477799 -0.0256928600 0.0578035738 -0.0082999502 -0.0056184276 0.0155923810 0.0167720371 -0.0678272776 -0.0051952309 -0.0132173417 -0.0494710128 -0.0631924893 0.0361540739 -0.0575929083 -0.0691345140 0.0666080896 -0.0988914390 -0.0535640219 0.0388647391 0.0947383256 0.0669226507 -0.0400662668 -0.1678972729 -0.1530289007 -0.1797864289 -0.1408798123 -0.0215448936 0.2382607763 0.2018442944 0.1841543625 0.1982854367 0.1656091297 0.0456931567 -0.2592363451 -0.1957875792 -0.1851490152 -0.0615412758 -0.1926218792 -0.1308032596 0.1058126289 0.2731535498 0.1641332165 0.0784493029 0.2581513097 0.0932007022 -0.1269239282 -0.2274376569 -0.1660540851 0.0246260824 -0.0073589767 -0.0034054625 -0.0006300051 0.0207850554 -0.0391283084 0.0055070514 0.0024838410 -0.0043639902 -0.0153599835 0.0387451836 -0.0397171894 -0.0183288910 0.0367265709 -0.0257562996 -0.0020520339 -0.0363240701 -0.0007034578 0.0123168476 -0.0007911360 -0.0156564813 -0.0016768905 -0.0036026254 0.0115557964 -0.0393522424 0.0371024922 -0.0003071151 0.0117035044 -0.0286577019 0.0166810792 0.0296969470 0.0122739089 0.0332228561 0.0171202020 -0.0199107713 0.0041483322 0.0199831115 -0.0043555708 0.0241076732 -0.0470153438 0.0059784077 0.0107655330 -0.0230176761 -0.0039864105 0.0321971343 -0.0517354906 0.0581936176 0.0134256469 0.0255823925 0.0272044935 -0.0005935182 0.0121856997 0.0154603094 0.0064290506 0.0264935412 -0.0415408660 0.0200928524 0.0302568940 -0.0258562065 0.0127011541 0.0203255072 -0.0471345336 0.0238246210 0.0343487727 -0.0522293923 -0.0030208804 0.0366839269 -0.0475795610 -0.0034035416 0.0349335554 0.0018902143 -0.0259137441 -0.0246754859 0.0010366221 0.0035537546 0.0118782173 -0.0152707042 0.0027291486 0.0240049904 -0.0203902185 -0.0079405693 -0.0127864542 0.0017183739 -0.0081648887 -0.0077267296 0.0149232376 0.0014418613 -0.0194001150 0.0212693874 0.0155834073 0.0147550042 -0.0021351127 0.0112661074 0.0269982248 -0.0095110037 -0.0067622372 -0.0232031285 0.0032366986 -0.0045970642 0.0005886969 -0.0009755272 -0.0026146174 -0.0252129463 0.0105836198 0.0191181780 0.0204559437 -0.0249918655 0.0074754847 -0.0333200952 -0.0266308842 0.0204880317 0.0164716900 0.0030620283 0.0124671388 0.0093994486 0.0212770731 -0.0068941686 0.0283425944 0.0242090410 -0.0232199998 -0.0193340054 -0.0201964182 -0.0097391514 -0.0341892834 -0.0212565891 0.0028848090 0.0353266228 0.0002187012 0.0008347526 0.0008834021 -0.0006489102 -0.0078708630 0.0402209900 0.0018490251 -0.0292331068 -0.0252721823 -0.0029942291 -0.0001946887 -0.0024261292 -0.0011448072 0.0005830099 -0.0002184030 0.0005014914 0.0001023342 0.0015868317 0.0016758884 -0.0000864702 0.0031394392 0.0003518563 0.0027303449 -0.0080283302 0.0029662842 0.0019629540 -0.0042191254 -0.0044059123 -0.0033614820 -0.0011092608 -0.0044333765 0.0001343189 0.0046964345 -0.0021357274 -0.0036357712 0.0078059054 0.0033400711 0.0013350637 0.0143593267 0.0059728582 0.0082911686 0.0006535536 -0.0037387012 0.0010499551 -0.0014966984 0.0150311110 0.0066518224 0.0089882602 0.0010356831 -0.0084997668 0.0003784405 -0.0033982782 0.0001762890 0.0016070819 -0.0062920267 0.0003461420 0.0058369607 0.0016735933 0.0031253551 -0.0032826510 -0.0006563538 0.0002025843 0.0040422207 0.0093064877 0.0021808564 -0.0144846460 0.0012871092 -0.0021159190 -0.0019661171 -0.0037173170 -0.0040377871 0.0014889277 0.0005515563 -0.0012004520 -0.0015929838 0.0019089866 -0.0045339442 -0.0089667418 0.0063302813 0.0018185172 -0.0153990407 -0.0169529919 -0.0226673200 -0.0345101891 -0.0276035775 0.0061399134 -0.0056623257 -0.0303846846 0.0072624282 0.0022869773 -0.0674157215 -0.0396077669 -0.0838249987 0.0351141561 0.0307749127 -0.0123408537 -0.0203745797 0.0408589403 0.0089404996 -0.0065493901 0.0447766419 0.0046656901 0.0893493510 0.0874703613 -0.0215169719 -0.0282075672 0.0321910581 0.0522376313 -0.0108736054 0.1231463992 -0.0483802332 0.0210871946 0.1145309711 -0.0131718754 -0.0488004517 -0.1327268146 -0.0839744138 -0.0803052579 -0.0124479999 -0.0063942625 0.0470775799 -0.0767503308 0.0662829081 -0.0180784104 -0.1474099790 0.0136401599 -0.0624408509 0.0511273527 0.0112478691 0.0346044097 -0.0510609892 -0.0538763135 -0.1602871263 0.0552250043 0.0766213291 0.0191564152 0.0403610027 0.0752514974 -0.0316874514 0.0080513952 0.0371743270 0.0345206986 0.0079899050 -0.0375821146 0.0178813138 -0.0338581289 -0.0075677290 -0.0223481630 -0.0000923689 0.0249344591 -0.0036657919 -0.0052877824 0.0032144367 -0.0051661643 0.0077917416 0.0020019302 0.0012315009 0.0057805193 0.0033410784 -0.0024621250 -0.0046039473 -0.0012148741 0.0046160092 0.0025784154 -0.0024949400 0.0018861946 -0.0000430181 0.0027969418 -0.0097945206 -0.0000946230 0.0025416721 0.0032982299 -0.0039668804 -0.0002370251 -0.0026006123 0.0077173373 -0.0071168704 0.0073693832 -0.0039241333 -0.0043378832 -0.0100417089 0.0012456939 0.0026466222 -0.0029566417 -0.0012287406 -0.0036353779 0.0008811857 0.0001766242 0.0004774388 -0.0010190119 0.0049794107 -0.0029019516 -0.0123966342 -0.0084821453 0.0052790817 0.0134207832 0.0056116806 -0.0035358016 -0.0212829635 -0.0215705708 -0.0183888237 -0.0185094704 -0.0020638467 0.0264277230 0.0210476850 0.0233831245 0.0213413143 0.0163135144 0.0080265924 -0.0283116387 -0.0233779019 -0.0283187234 -0.0020351714 -0.0130925975 -0.0243120108 0.0165002746 0.0337179978 0.0166645522 0.0054302879 0.0270586050 0.0163746767 -0.0111182701 -0.0181441640 -0.0266491898 0.0052962840 0.0012095343 0.0002376956 -0.0079162154 -0.0158855429 0.0098115221 -0.0054490652 0.0248119381 0.0344636419 0.0799475945 0.0003284713 -0.0019354734 0.0004182638 0.0021777488 0.0005970269 -0.0005745251 -0.0016335075 0.0016552562 -0.0006158118 -0.0011561659 -0.0055894014 -0.0004826886 -0.0025284996 0.0028501893 -0.0080211093 0.0084557338 0.0004721380 0.0010773644 -0.0063735534 0.0024848207 0.0068035672 0.0031357895 0.0031434285 0.0014690471 0.0000357155 -0.0001718526 -0.0001136680 0.0032283634 0.0034286533 -0.0021771891 0.0031589579 0.0024304875 -0.0050738020 0.0015521445 0.0088790568 -0.0205216298 0.0198469430 0.0029275075 0.0136705824 -0.0028583325 0.0006844331 0.0013022292 0.0010528357 0.0028485667 0.0102401981 -0.0048469290 0.0034490590 0.0015929189 -0.0049795421 0.0051701688 0.0027293275 -0.0145393238 0.0094739120 0.0107976815 -0.0029054924 -0.0008445016 0.0010774748 -0.0031395334 -0.0009132841 0.0016425291 0.0020998047 -0.0029521983 -0.0047181681 -0.0255122999 -0.0105238235 -0.0443269903 0.1024695943 -0.0089576947 -0.1176585249 0.1237609812 0.0523563084 0.0333819399 0.0148922743 0.0487834526 0.0193325811 -0.0702326184 0.0146951298 0.0970254414 -0.0913408248 -0.0582577917 -0.0365476285 0.0903516226 -0.0409568944 -0.1126932445 0.0878945315 0.0234595894 0.0902141085 0.0006516363 0.0012460137 0.0085245039 -0.0208997452 0.0006705072 0.1252798849 -0.0251406798 -0.0907310408 -0.0628227453 0.1484294459 0.0009816273 0.1400522111 0.0955934672 -0.1533007706 -0.0956122664 -0.0096732175 -0.0001526403 -0.0878543914 -0.1711721108 0.0201411769 -0.1337290956 -0.1217836395 0.1941162395 0.1036999301 0.0481141078 0.0659088549 0.1850935676 -0.0180186940 -0.1844549178 -0.1302508588 0.0114878567 0.0163264599 -0.0042302165 -0.1306708606 -0.1248248188 -0.1386134208 -0.0787161774 0.1640270612 0.1553364704 -0.0191949670 -0.0014270388 0.0069372674 -0.0073079038 0.0038614759 0.0198804965 0.0191678256 -0.0252317083 -0.0114616607 0.0029921318 -0.0115685042 0.0015742895 0.0665071103 -0.0322277865 -0.0092020186 0.0877311895 -0.0288576766 -0.0298192946 -0.0295648977 -0.1310647476 -0.0164921228 -0.0521372315 0.0109481232 0.0605277448 -0.0442395225 -0.1292050124 -0.0949046620 -0.0009358278 0.0938564602 0.0064457843 0.0682036389 0.1281123106 -0.0087744269 -0.0362880805 0.0371353664 0.0092569912 0.0260350236 0.1354923877 -0.0580529950 -0.0465793889 -0.0873978458 -0.0949320538 -0.0657285305 0.0289540236 -0.0387177334 -0.0491123122 0.0230570209 -0.0423951289 -0.0298201859 0.1501805280 -0.0077096614 0.0471221184 0.0071126284 0.0035997343 -0.0673525945 0.1545647669 -0.0014158781 -0.0235223769 -0.1125894534 -0.0434285948 0.0096893210 -0.1009825152 -0.0110171045 0.0593376157 -0.0196566197 0.0564086999 0.0176349188 -0.1011251746 -0.0000458214 0.0139608811 0.0529318553 0.0714581777 -0.0002701840 -0.0005039525 -0.0008175984 -0.0010884378 -0.0005332651 -0.0029370549 0.0009245286 0.0015159758 0.0005889004 -0.0003556195 0.0001520564 -0.0018442531 -0.0017614181 -0.0005028192 0.0004974914 -0.0041611844 -0.0032575193 -0.0018005420 -0.0025676556 0.0008386584 0.0003560780 -0.0000752473 0.0000227055 0.0031095275 0.0591781448 0.0292843586 0.0377631082 -0.1569723587 -0.0390606707 -0.0615979163 -0.0758548205 -0.0592917214 -0.0063591187 0.0387691094 0.1707950189 -0.0094187051 0.0863854869 0.0559355840 -0.0641022243 -0.0887494030 0.0510985527 0.0094253259 0.0064875913 0.1688827074 0.0724753730 -0.0093476810 -0.1270919212 0.0034025052 -0.0586115656 -0.0148265807 -0.0235833174 -0.0131062317 -0.1260764843 -0.0105805530 -0.0321961571 -0.0030795666 -0.0642607169 0.0092989533 -0.0567678933 -0.0690247203 0.0285999321 -0.0037177463 0.0434817101 -0.0279809178 0.0070067720 -0.0192033011 0.0318319977 0.0269211076 0.0125167804 -0.0222163043 0.0175146374 -0.0072360139 -0.0100152998 -0.0049889493 0.0088343127 0.0039786753 0.0051151980 0.0018197388 -0.0012608945 -0.0037069550 0.0008618730 0.0075210356 0.0011846457 -0.0131891629 0.0066857149 0.0127472881 0.0071109476 -0.0055113405 0.0043681951 0.0096464397 0.0003609604 -0.0088904240 -0.0048877813 0.0038195785 0.0072269981 -0.0145271797 0.0103829558 0.0103149821 0.0027472054 -0.0077188490 0.0024673024 0.0068782371 -0.0163504793 -0.0088624737 0.0019554180 -0.0177516345 -0.0134054833 0.0005930246 -0.0214158092 -0.0125107194 0.0084977054 -0.0107532393 -0.0083875331 -0.0001042975 0.0127805500 0.0073077926 0.0014921255 -0.0154577018 -0.0179829554 -0.0251872925 -0.0176350216 -0.0040557289 0.0310087877 0.0226375729 0.0234374100 0.0276998972 0.0235320821 0.0089879631 -0.0356328492 -0.0228100057 -0.0188947510 -0.0077068973 -0.0222415855 -0.0165295365 0.0164954191 0.0298000393 0.0251560730 0.0093497547 0.0281031107 0.0168363172 -0.0260067444 -0.0321093571 -0.0223357747 0.0098501509 -0.0045174216 -0.0061371012 -0.0092238339 -0.0019968600 0.0057685217 -0.0110642277 -0.0216497291 0.0199359250 0.0409601595 0.0040243704 -0.0033102378 -0.0014828383 0.0034381226 -0.0026106138 -0.0001470596 -0.0031281381 -0.0000429051 0.0008911475 0.0000667087 -0.0004776773 -0.0001745840 0.0002188032 0.0001497069 -0.0009351475 0.0011811247 0.0010274596 0.0010311539 -0.0009580415 0.0002933111 0.0005851938 0.0004393499 0.0024641475 0.0013613174 -0.0018273131 0.0003083812 0.0018225141 -0.0005737596 0.0006710632 -0.0019596597 0.0010056852 0.0000735027 -0.0000369491 -0.0003442631 0.0014427667 -0.0004881893 -0.0036121643 -0.0016334877 -0.0031136993 0.0010178037 -0.0036886005 -0.0004787776 0.0065541930 -0.0004058925 0.0043596733 0.0006951131 -0.0000036909 0.0002903618 -0.0017087144 0.0013983285 0.0023141776 -0.0001535918 0.0006939276 0.0008955590 -0.0044706224 -0.0002359595 0.0034122899 -0.0039950620 -0.0000704490 0.0030479902 -0.0002136899 -0.0019828366 -0.0014083663 0.0171052728 -0.0372948732 -0.0667417836 0.1055967586 -0.0455637778 -0.1088590595 0.1028000377 0.1097673714 0.0732532244 -0.0153511335 0.0106371612 0.0746120507 -0.1417319665 0.0250229359 0.1131903811 -0.1431210437 -0.1449239188 -0.0732250644 -0.0056081186 -0.0896183019 -0.1424905439 0.0224734095 0.1586845892 0.1004000828 0.0072280784 -0.0214723440 0.0002838855 -0.0771204666 0.1408251041 0.1022043635 -0.1089369526 -0.1323085571 -0.1158916984 0.1125262997 -0.0372666972 0.1211757729 0.1162763069 -0.0885058308 -0.0390314483 0.0125559508 -0.0469036475 -0.0255040505 -0.0736083752 0.0112409606 -0.1020264168 -0.0755584408 0.0713696827 0.0395055320 0.1092906907 -0.0233494439 0.1214764383 0.0881168200 -0.0469052942 -0.0914835268 -0.0028809627 -0.0030229349 -0.0077507706 -0.0337632056 0.0080403597 -0.1234349330 -0.0109929360 0.0663308599 0.0788402556 0.0292398925 0.0200444361 0.0079473791 0.0083177832 0.0112995763 -0.0080593319 -0.0215989355 0.0110028571 -0.0050299841 -0.0154225056 0.0017544782 -0.0239663418 -0.0673584667 0.0014959323 0.0452635095 -0.0857882667 -0.0006304352 0.0459576150 0.0413321190 0.1203248278 0.0103054928 0.0692568938 -0.0013924831 -0.0616778709 0.0497826580 0.1178494218 0.0107177820 -0.0066080577 -0.0741852607 -0.0604058630 -0.0854710257 -0.1556180059 0.0165963509 0.0466616959 -0.0273080505 -0.0088400523 -0.1154656867 -0.1495354889 0.0170429702 0.0161512534 0.1305234341 0.0464015947 0.1060047500 -0.0035910880 0.0384621329 0.0799109916 0.0091118829 0.0174496988 0.0304546028 -0.1707136319 0.0109140524 -0.0495421980 -0.0283030281 -0.0103163030 -0.0053057837 -0.1664116438 0.0543312271 -0.0012531441 0.1128197732 0.0984149694 0.0136216753 0.1528498274 0.0200546772 -0.0663065734 0.0090948688 -0.0677062306 0.0046082719 0.1532650853 0.0963151634 -0.0365607684 -0.0987251096 -0.0180010202 -0.0013154657 -0.0021489796 -0.0023717909 -0.0019185044 0.0003818042 0.0010359533 -0.0036103508 -0.0001319832 0.0008134605 -0.0060130070 -0.0036631343 -0.0070026127 0.0037280973 0.0050083940 -0.0018325734 -0.0054333301 0.0056926989 0.0006860303 0.0033512688 0.0054150495 -0.0018169686 0.0097475775 0.0116531823 -0.0037798238 0.0341597413 -0.0305707069 0.0119729544 -0.0012719876 -0.0445372039 -0.0499803624 0.0076914879 -0.0478186699 0.0053529080 -0.0186509793 0.0597023669 -0.0425552399 0.0291083303 0.0127841932 0.0411376822 -0.0246158740 0.0161926852 0.0371047238 0.0491044359 0.0490306378 -0.0609827783 -0.0178628110 -0.0418509380 -0.0034849019 -0.0505641118 -0.0213818794 0.0368210985 0.0057360293 -0.0376741144 -0.0965926567 -0.0012712046 0.0066870106 0.0106860868 -0.0053718991 0.0011539194 0.0237856252 0.0038706500 0.0155530970 -0.0238253453 -0.0002949579 -0.0061801049 0.0054817014 -0.0032549638 -0.0029975797 0.0078731601 0.0005284158 -0.0059445422 0.0060023759 0.0049754455 -0.0001914479 0.0018380414 0.0017348570 0.0003508116 0.0014022800 0.0008397755 -0.0009650623 0.0015127476 -0.0009248641 0.0014479475 0.0018621309 -0.0015530958 0.0010424591 -0.0010825947 0.0040516573 -0.0043227424 0.0026747651 -0.0032859354 0.0022852615 -0.0002080512 0.0038177459 -0.0010781209 0.0053018900 -0.0072094185 0.0057753996 -0.0060863571 0.0003191599 -0.0022612043 0.0006849418 -0.0002747687 0.0018701750 -0.0015389455 -0.0000849097 -0.0010970153 -0.0012213339 -0.0000046002 -0.0001094263 -0.0034189265 -0.0018325335 -0.0009181939 -0.0013811952 0.0015886683 0.0013860580 0.0015104838 -0.0007718748 -0.0024013908 -0.0026023064 -0.0035744578 -0.0002862369 0.0032535389 0.0009752076 0.0027061824 0.0028708087 0.0031285583 0.0025135078 -0.0039810534 0.0004248404 -0.0061943186 0.0015693387 -0.0008705494 -0.0037303575 0.0041498217 0.0038761178 0.0007534628 -0.0000556242 0.0054867804 0.0001804691 -0.0026475779 0.0001476819 -0.0066813570 0.0034851437 0.0007575411 -0.0011854449 -0.0021973198 0.0053290444 -0.0088907455 -0.0009375099 -0.0072577005 0.0294549957 0.0629406096 0.0001259303 -0.0006822954 0.0005308732 0.0007972560 -0.0000357726 -0.0000730947 -0.0007433171 0.0007780906 -0.0003707313 -0.0007632888 -0.0028925792 -0.0001506080 -0.0009438132 0.0016068991 -0.0042854879 0.0045883396 0.0006040732 0.0015067589 -0.0029431728 0.0008844939 0.0027760459 0.0012510131 0.0011978068 0.0005460494 -0.0000112921 0.0000050222 -0.0000941777 0.0007726213 0.0027617647 -0.0030176952 0.0012375267 0.0014225783 -0.0027654441 0.0005570107 0.0042878413 -0.0092407682 0.0057214720 -0.0008654066 0.0045617829 0.0013176169 -0.0010769445 0.0010805758 0.0056930785 0.0004849139 0.0053084781 -0.0006515371 0.0010215332 0.0000799282 -0.0029542455 0.0030558309 0.0025041695 -0.0054735520 0.0041880736 0.0047022282 -0.0011807110 -0.0002942266 0.0001074868 -0.0011111260 -0.0003202581 0.0005092252 0.0008677304 -0.0011596517 -0.0018352007 0.0238327794 0.0292383421 0.0790979137 -0.1986777701 0.0346908624 0.1907644516 -0.2173631498 -0.1361714425 -0.0664746803 -0.0163627510 -0.0559463252 -0.0592007718 0.1763175164 -0.0391627142 -0.1776399601 0.1875652956 0.1517209516 0.0592432272 -0.1405719215 0.0775940745 0.2017508963 -0.1346329760 -0.1443926456 -0.1309993231 -0.0070479919 0.0175817371 -0.0154907932 0.1081592978 -0.0918813873 -0.1913110844 0.0978803228 0.1792458099 0.1100670099 0.1751156451 -0.0327155201 0.1540285482 0.1457640384 -0.1579994922 -0.0681513847 0.0124414203 -0.0298759440 -0.0592689675 -0.1552374997 0.0160880848 -0.1436222842 -0.1191368625 0.1562089118 0.0628902586 0.1296619875 -0.0106317998 0.1747794344 0.0678324422 -0.1595672511 -0.1090589874 0.0060337072 0.0095270843 -0.0135707393 -0.1277675074 -0.0603484751 -0.1499901064 -0.0578599046 0.1363900844 0.1140569989 0.0152790360 -0.0100683947 -0.0158386544 0.0025783482 -0.0146770794 -0.0237711706 -0.0144836314 -0.0023129875 -0.0123461663 -0.0091968446 -0.0082115717 -0.0213045964 -0.0102855816 0.0185672859 0.0160557919 -0.0248327184 0.0139446376 0.0219913326 -0.0063429551 0.0543214536 -0.0140127507 0.0300425189 -0.0079569920 0.0098768434 -0.0350273279 0.0611814184 -0.0254154518 0.0145868596 -0.0390729246 0.0361427158 -0.0106909155 -0.0437536362 0.0271099712 -0.0065443930 -0.0130592676 -0.0230304456 -0.0060058933 -0.0454726980 0.0152370586 -0.0415068409 0.0333132512 -0.0527686475 0.0270228180 0.0051439324 0.0256898624 0.0113985132 0.0140003349 0.0227817691 -0.0031205335 -0.0466543993 0.0276798360 0.0034336029 -0.0150625496 -0.0237857185 -0.0011636600 -0.0474159404 0.0051666775 0.0595718084 0.0192464612 -0.0650478230 0.0219468903 0.0492304260 -0.0152807476 -0.0349552678 0.0010313589 0.0118335429 0.0591095638 0.0462030710 -0.0405969676 -0.0261422785 -0.0327303566 0.0287482816 0.0002608988 0.0001831496 0.0002649138 0.0001600444 -0.0001158866 -0.0005737969 0.0003578467 0.0007965654 0.0008090201 0.0004481617 0.0006173482 -0.0001019811 -0.0007382970 -0.0004807409 -0.0000320594 -0.0029153844 -0.0003734556 0.0004014320 -0.0010233385 -0.0003926506 0.0001853464 -0.0001316746 0.0001550768 -0.0003257969 -0.0025759213 0.0022268940 -0.0012475486 0.0007922159 0.0042332416 0.0046254195 0.0010072278 0.0042530402 0.0013380378 -0.0002643696 -0.0036252500 -0.0003083470 -0.0013237076 -0.0001901289 0.0021467416 0.0017052563 -0.0002353008 0.0014831220 0.0003325607 -0.0035029378 -0.0014333074 0.0018490538 0.0039720927 0.0001039129 0.0005952822 0.0011254416 0.0045702047 0.0064110956 0.0039018478 -0.0040816230 0.0028082452 0.0018850771 -0.0036517354 -0.0021308373 -0.0015668455 0.0023547155 0.0006828055 -0.0013588642 -0.0006119685 0.0020023965 -0.0015002015 0.0012637929 -0.0024332360 -0.0006437076 0.0009113072 -0.0355470141 0.1074404780 -0.0373703738 0.0068536371 -0.0112312690 -0.0255174748 -0.0064257770 -0.0175776546 -0.0214141668 0.0046990186 0.0242064032 0.0175137779 -0.0211423878 -0.0104236558 0.0242273651 0.0107430741 0.0038552306 -0.0066838525 0.0209707831 0.0211849988 -0.0176049012 -0.0132669966 0.0008455023 0.0169970520 -0.0063644595 0.0058813006 0.0418956702 0.0037756179 0.0067916012 0.0358627021 0.0191486789 0.0018849960 -0.0251537918 -0.0069259724 0.0079358069 0.0082792258 -0.0273669909 -0.0540653492 -0.0034029042 -0.0047595931 -0.1060226704 0.0228562007 -0.0037880959 -0.0040957944 -0.0252835061 -0.0001058471 0.0134081670 0.0227734774 0.0127135876 0.0079568695 -0.0234890803 -0.0170388160 -0.0034061698 0.0135499912 0.0001068653 0.0001714441 0.0190542723 0.0291147051 0.0094373541 -0.0254584371 0.0099829963 -0.0020153415 0.0012281340 -0.0007296025 -0.0038140170 0.0331810834 0.0212595992 -0.0138232475 -0.0015607010 0.0299803686 -0.0206290719 -0.0425832903 -0.0216862831 -0.0122698518 0.0296110762 -0.0079384741 -0.0031120559 0.0034023134 0.0475315635 -0.0460281798 -0.0001412469 -0.0005584799 -0.0000494374 0.0014902380 0.0403678890 -0.0144783965 -0.0314189474 0.0083909920 -0.0649536557 0.0294559426 -0.0046445368 -0.0363980490 0.0304449595 0.0111231428 0.1381639428 0.0087661032 0.0279903327 -0.0669148725 0.2209767088 -0.1791370592 0.0189273490 -0.0779171723 0.1567104461 -0.0558210218 -0.1495819996 -0.0667951059 -0.0335211522 -0.0184011676 -0.0284440726 0.0102768695 0.0284474872 0.0200016973 -0.1601171334 0.2662375595 -0.0104256074 -0.0618155274 0.1046871649 0.0190207008 -0.1909817228 0.3228921237 -0.2847162433 -0.0765295214 -0.1209769678 -0.2413186409 -0.0517846195 -0.1061697164 -0.0265894329 -0.0293685931 -0.0375655053 0.0737065732 -0.0631942318 -0.0473889347 0.1668783892 -0.1547421156 -0.1569864928 0.2642557498 -0.1986856686 -0.2349357708 0.0011980102 0.0178601236 0.0219916184 0.0177581759 0.0167225930 0.0023361378 -0.0524052489 0.0408780640 0.0893930569 -0.0012504184 0.0008083924 0.0001767191 -0.0000757980 -0.0006430420 0.0008543469 -0.0002344145 -0.0009525523 -0.0007455659 0.0013626072 -0.0006251622 -0.0002708061 0.0013679881 0.0006711385 -0.0007533552 0.0017644977 0.0007043786 0.0012693512 0.0003179401 0.0012338534 0.0004202554 -0.0015217682 0.0024222084 -0.0027954838 0.0000004841 0.0005956998 -0.0002141243 -0.0007317173 0.0021393670 -0.0022611225 0.0018313542 0.0009683311 0.0009499711 0.0036949835 0.0000664349 0.0024242620 0.0019843762 -0.0042391088 -0.0007063321 -0.0007092282 -0.0014425961 -0.0007932953 -0.0052852116 -0.0000286465 -0.0039027046 -0.0032055812 0.0047645322 0.0002631569 0.0061516594 0.0048088882 0.0007117228 0.0046315001 0.0005836034 -0.0035176723 0.0040881797 0.0030547779 -0.0016628639 -0.0032902920 0.0004064631 -0.0050727393 -0.0003332805 0.0070829672 -0.0003867678 -0.0007314407 -0.0005104828 -0.0003516487 -0.0006791013 -0.0002082280 0.0005615630 0.0007123212 -0.0002506600 0.0000482888 -0.0003923905 -0.0004587775 -0.0005110677 0.0016565771 -0.0011677748 -0.0013796730 0.0020890174 -0.0008587119 -0.0014165627 -0.0004671795 -0.0045862731 -0.0008500363 -0.0011370183 0.0001495031 0.0014783636 0.0001462715 -0.0047575998 -0.0015656658 0.0017335116 0.0031157174 0.0010449463 0.0019748791 0.0037568292 0.0001731556 -0.0014382280 0.0011411809 0.0001613056 0.0021435219 0.0037359766 0.0002931584 -0.0011270442 -0.0022778558 -0.0016751723 -0.0017051021 -0.0005336142 -0.0009092990 -0.0013888025 -0.0004794991 -0.0003329638 -0.0002258840 0.0023848365 -0.0005923664 0.0003077577 0.0006951771 0.0004504430 0.0002864323 0.0023494373 -0.0007620666 -0.0009841947 -0.0011095468 0.0000630787 -0.0010391772 -0.0027445310 -0.0000099201 0.0009606139 -0.0000176987 0.0002189760 -0.0018216459 -0.0026735672 -0.0003277168 0.0004389368 0.0020176704 -0.0008276340 -0.0184699166 -0.0250864954 -0.0374341725 -0.0189162287 0.0145046956 0.0389509840 -0.0585375192 -0.0317210674 -0.0246497291 -0.0831898385 -0.0665009855 -0.0755927621 0.0783358735 0.0485096047 -0.0250915466 0.0643362405 0.0600101007 -0.0125536578 0.0442966480 0.0477447339 -0.0057928721 0.1132261223 0.0817600055 -0.0281118792 -0.0001886615 0.0026829482 0.0013623882 -0.0045838217 0.0032480156 0.0009902567 -0.0011451740 0.0024535131 0.0008993963 0.0010568315 -0.0014244723 -0.0006376183 0.0014227155 0.0005217825 0.0007431208 -0.0008325969 0.0015067277 0.0014308368 -0.0034489232 -0.0008203634 0.0017268454 0.0010184420 0.0018255250 0.0016119096 0.0021850953 0.0025790395 -0.0021621439 0.0014746217 0.0014119742 0.0067050923 -0.0007110186 -0.0018925512 0.0005257128 -0.0012049317 -0.0003379390 -0.0016951229 0.0026583511 0.0014774410 0.0013228609 0.0013225468 0.0013284086 -0.0002275763 0.0021263073 -0.0023450510 -0.0030131930 -0.0315032064 0.1795635315 0.1091459075 0.0450544183 -0.0127225025 -0.1707535126 -0.0526609929 -0.0765241573 -0.1281759441 0.0223628916 0.1364842483 0.0843636968 -0.1116436301 -0.0685248573 0.1642176008 0.0584990838 -0.0186449083 -0.0430055898 0.1043375373 0.1099937682 -0.1218932007 -0.0877597220 0.0322743875 0.1002521049 0.0082640158 -0.0095317622 0.2861410690 0.0580849669 -0.0329140750 0.2041771603 0.1206647234 0.0044392893 -0.1414634682 0.0282283744 0.0395625010 0.0833242295 -0.0846904250 -0.1423861714 -0.1236438711 -0.0131726142 -0.2183262798 -0.2008049302 0.0118304600 -0.0577292847 -0.2025390678 0.0143046831 0.0352294721 0.2126033568 0.1542217681 0.0624985177 -0.0836068494 -0.0835746508 -0.0806870312 0.0168994591 -0.1112732157 -0.0455189759 0.0445746749 0.1356623959 0.0957152691 -0.0776924108 0.0840168968 0.0618226660 0.0682688814 -0.0146079819 0.0441858987 0.1768696748 -0.0663244570 0.0033965159 -0.1413301268 0.0093031265 0.0144292753 -0.2710781714 -0.0360363542 0.0039135480 0.2203392359 -0.0391198766 -0.0378538395 0.0147718146 0.0167420247 -0.0286224363 -0.0084029548 0.0000806714 0.0000212694 -0.0002335955 -0.0113607368 0.0198638093 0.0198116209 -0.0038275441 0.0136216057 0.0012257809 0.0088073989 0.0149603091 -0.0168433112 -0.0030808608 -0.0359874253 -0.0015569833 -0.0064660147 0.0164205663 -0.0534262892 0.0412910301 -0.0048722264 0.0190798099 -0.0373835801 0.0114050593 0.0350070659 0.0124340224 0.0024289658 0.0002775728 0.0104559697 -0.0031595564 -0.0115496156 -0.0063053266 0.0379849667 -0.0661156879 0.0014032317 0.0153584741 -0.0287200762 -0.0050176844 0.0442848097 -0.0755842670 0.0645229725 0.0183032607 0.0262967865 0.0628844715 0.0146003938 0.0267633152 0.0031577362 0.0071874416 0.0038499969 -0.0092791695 0.0125655141 0.0048380357 -0.0410794854 0.0411528009 0.0397551493 -0.0634847831 0.0509561817 0.0585223233 0.0076237992 -0.0039301542 -0.0122199503 0.0061350450 -0.0033416522 -0.0086941915 0.0128314431 -0.0058736885 -0.0154713965 -0.0003553329 0.0016307549 -0.0011423373 0.0008477173 -0.0009047162 -0.0001364104 0.0008976490 -0.0010652285 0.0012887720 -0.0000791069 -0.0000695437 0.0011172990 0.0001816984 0.0004723584 0.0003949752 0.0008042651 -0.0013170846 -0.0001332256 0.0005827183 -0.0016058635 -0.0000570192 -0.0023184828 0.0043472885 -0.0014884633 -0.0015891889 0.0001431325 0.0004327506 0.0000400287 0.0041930259 -0.0010775822 0.0008519990 -0.0012660899 -0.0002305431 -0.0009075086 -0.0012435551 0.0003864774 0.0008965141 0.0014874079 -0.0004650622 -0.0004183158 -0.0007786993 0.0006419291 0.0013694823 0.0009368829 0.0001602556 -0.0005493054 -0.0019284001 0.0006190715 -0.0008874254 -0.0014661100 0.0004022929 0.0019250053 0.0026253356 -0.0009616886 -0.0014884650 -0.0011403544 0.0003620772 0.0032428871 0.0043431108 -0.0012209273 0.0003430454 -0.0004150220 -0.0003770026 0.0014540061 0.0004417077 0.0008171098 -0.0007796529 -0.0010806878 -0.0005720762 -0.0002736525 0.0002177707 -0.0002374188 0.0002604649 0.0000867859 0.0000435028 0.0001263257 -0.0021995029 -0.0004513904 0.0017371894 -0.0015037727 -0.0013532961 -0.0002657438 -0.0035726887 -0.0001305514 -0.0012850439 0.0010486381 0.0007378408 0.0021954865 -0.0041805902 -0.0008173084 0.0004178800 0.0028219946 0.0004485632 0.0012987320 0.0021837710 -0.0005788588 0.0002160042 0.0012662491 0.0000045396 0.0004109555 0.0024392275 0.0006400938 0.0011841498 -0.0014413320 -0.0001222069 -0.0022287428 -0.0006939132 -0.0016995622 -0.0005267382 -0.0019399294 -0.0014052465 -0.0004328121 0.0031637596 -0.0007259302 0.0004520219 0.0013897097 0.0003083565 -0.0001880869 0.0031891385 0.0017763176 -0.0026925331 -0.0013518999 0.0015573826 -0.0006333523 -0.0037935157 0.0000689196 0.0023720134 0.0005390240 0.0007294338 -0.0039909607 -0.0035285215 0.0011099889 0.0006019522 0.0030356497 0.0015523053 0.0238262459 0.0164539427 0.0404638599 0.0330867255 -0.0012212837 0.0290657876 0.0228403880 -0.0089975634 0.0154144661 0.0503166880 0.0273684869 0.0651523456 -0.0196066374 -0.0070566337 0.0020196662 -0.0390554904 -0.0306472976 -0.0167275519 0.0157829568 0.0124600801 -0.0285043427 -0.0374714619 -0.0181819500 -0.0111836905 -0.0027703995 0.1300801991 -0.0616243339 -0.1698071968 0.0521920890 0.2146998967 -0.0590680377 0.0309329742 0.0645358444 0.1462904919 0.0161318900 0.0448353333 0.1320990010 0.0656799778 0.0389916604 -0.1035704938 0.1102688571 0.0347181876 -0.1113294336 0.0642525454 0.0158024828 0.0818671436 0.0308251435 0.0597909413 0.0297841102 0.1380335497 -0.0019924839 0.2424783089 0.0111561438 0.1403680533 0.0201623859 -0.0922788068 -0.0734367887 -0.0495711436 -0.0885554142 -0.0278700217 -0.0039786210 0.0121025277 0.0250198687 -0.0321188669 0.0167723005 0.0099034784 0.0300044626 0.0047997321 0.0073758512 -0.0038917954 0.0011094022 -0.0040495495 -0.0007045394 -0.0042698002 0.0080907472 0.0030379231 0.0023660403 0.0035150658 0.0000518714 -0.0045207805 0.0000248979 0.0036425065 0.0018579407 -0.0073355910 -0.0006849798 0.0052141834 0.0020941686 0.0006394814 -0.0052777737 0.0078450289 -0.0005492044 -0.0015535460 -0.0042496793 0.0048569809 -0.0010931829 -0.0071510503 -0.0033656804 0.0079542629 -0.0066156669 -0.0041920780 -0.0032319015 0.0047945993 -0.0055866512 -0.0027236024 0.0002298717 -0.0052634507 0.0002259663 0.0019707513 -0.0081195557 0.0019128201 0.0069787239 0.0007451030 0.0020944105 0.0021598881 -0.0003194179 -0.0016059123 -0.0021407767 0.0002818971 0.0005321027 0.0003898278 0.0032452784 0.0005793497 0.0000545178 0.0008968676 0.0014418327 -0.0000623027 -0.0021352140 -0.0005005122 0.0001019350 0.0023244169 -0.0000756253 -0.0024840821 -0.0004528251 -0.0027642042 -0.0053118556 -0.0017384015 0.0020596672 0.0047383777 -0.0010974887 -0.0009000941 0.0009682941 0.0007348187 -0.0030719094 -0.0018230123 -0.0001922305 -0.0019876838 -0.0042181596 0.0079189132 -0.0023941946 -0.0044350234 -0.0213133061 0.0266845189 -0.0130458056 0.0000814112 -0.0004503252 0.0002590617 0.0000264102 0.0007284590 -0.0009063953 -0.0009846908 0.0006114990 -0.0000914434 -0.0012336675 -0.0021664121 0.0003872893 0.0022707448 0.0004245586 -0.0039835950 0.0022645952 0.0024491948 0.0060426072 -0.0023695357 -0.0009511753 -0.0023358910 0.0009601646 0.0006193732 0.0004710887 0.0001738971 -0.0000918119 -0.0001074670 -0.0072297433 0.0082016061 -0.0184178513 -0.0044943342 0.0006241728 0.0026815428 -0.0040298429 0.0017515531 0.0083251316 -0.0185719563 -0.0042089624 -0.0173547034 0.0253066833 -0.0069988538 0.0032868964 0.0213542511 -0.0030483093 0.0000529123 0.0128324618 -0.0045485674 -0.0021137477 -0.0105330312 0.0087658951 0.0173333006 0.0127315877 -0.0020099078 -0.0023403022 -0.0004855194 -0.0002619610 -0.0000109706 -0.0007431800 -0.0000870562 0.0004170079 0.0007325247 -0.0008253770 -0.0012581236 0.0335465227 0.0081557936 -0.0124497294 -0.0185849043 -0.0506705956 0.0737165775 -0.0724529963 0.0552836639 0.0024734851 -0.0124060166 -0.0769757930 0.0495727664 -0.0146979277 0.0309435902 -0.0507534168 0.0330075424 -0.0666423586 -0.0000909525 -0.0923053278 -0.0352108569 0.0373389221 -0.1122024937 0.1831770184 -0.0766284481 0.0051681670 -0.0372035979 -0.0082911047 -0.0460150870 0.2205722269 -0.1326140090 -0.0280140875 0.0067417830 -0.0208078287 0.0124457225 -0.0690350539 0.0706086691 0.0901151017 0.0185001274 -0.0016399950 -0.0042488668 -0.0783655186 0.0365269663 0.0144371424 0.0371357606 -0.0595880903 -0.0571198785 -0.0529689884 -0.0039433140 0.0748323683 -0.0791626565 0.0397257615 0.1700633188 0.1486097150 -0.0749688112 -0.0153210874 -0.0311535608 -0.0028372540 0.0793007210 0.2007094814 -0.1133791350 0.0016162790 -0.0167014306 -0.0080570149 0.0366563151 0.0190368541 -0.0042244723 0.0028168794 0.0059881361 -0.0271121591 -0.0267604610 0.0265052031 -0.0016086449 -0.0073402532 0.0074303692 -0.0268852320 -0.0408137625 -0.1125643967 -0.0311139287 0.0647669414 -0.0703893443 -0.0585522035 -0.0238824672 -0.1331906895 0.0100599041 -0.0754303703 0.0712204683 0.0260654947 0.1417177152 -0.1729349024 0.0277691093 0.0038907663 0.1186182089 0.0664042566 0.0445113385 0.0682608111 -0.0346234713 0.0331567121 0.0602902340 -0.0069740770 0.0133061496 0.0808833604 0.0806543333 0.1148994646 -0.0605657483 0.0550444895 -0.0762320657 -0.0456245825 -0.0527530408 -0.0025805875 -0.1146435864 -0.0284038614 -0.0140904212 0.0652980420 -0.0229196954 -0.0068127186 0.0614831115 -0.0014753415 0.0295460845 0.0628972810 0.0707892028 -0.0985705967 -0.0104000542 0.0463825058 -0.0291293743 -0.1297068645 0.0022210202 0.0768422750 0.0400579706 0.0194789183 -0.1865853632 -0.1166674974 0.0131963715 0.0217312887 0.1148333652 0.0473126421 -0.0001222751 0.0001060306 0.0001089004 -0.0001195684 -0.0002224709 -0.0005469703 -0.0000536793 0.0009869565 0.0009994765 0.0001653500 0.0007439124 -0.0003273227 -0.0004779025 0.0003305967 -0.0002502630 -0.0025212063 0.0024809375 0.0023785506 0.0001936647 -0.0009030839 -0.0000204161 0.0005536292 0.0018854136 -0.0017116800 -0.0246157425 -0.0336569318 -0.1322435317 0.2352254002 -0.0805217615 0.1280116967 0.0608659203 -0.0382880488 -0.0008990626 0.0357050245 0.0131121632 0.1848508629 0.0131197057 -0.0313139050 0.0216457473 0.0252580942 0.0202064340 -0.0181857716 0.0368385278 -0.0242020751 -0.1908184835 0.0626582420 0.0145078202 -0.0014667373 -0.0149434832 0.0247957889 0.1336383826 0.2347656128 0.0078124730 -0.1433937430 0.0400671626 -0.0349517895 0.0803107683 0.0526368678 0.0207568164 -0.0753930887 -0.0049889158 0.0032211246 -0.0042063579 0.0010373125 0.0038176689 -0.0009187648 -0.0001434071 -0.0056001864 0.0040470307 0.0003112228 -0.0009204660 0.0016188458 0.0013091536 0.0002935696 -0.0008760347 -0.0006424626 -0.0002344712 -0.0005438351 0.0004182951 0.0004236718 0.0002973142 -0.0009130588 -0.0001772561 0.0014638796 -0.0000702811 -0.0009705378 -0.0004459024 -0.0002431262 0.0007763984 -0.0015170648 0.0000957801 0.0000532412 0.0009222157 -0.0003308736 -0.0003693691 0.0019353697 0.0015679753 -0.0023762917 0.0016635570 0.0008431179 -0.0002611577 -0.0010846896 0.0008774376 0.0010116826 -0.0000138883 0.0009581190 -0.0002176351 0.0001649739 0.0015010031 -0.0006364391 -0.0004768007 0.0003599258 0.0001993097 -0.0002897887 -0.0004244678 0.0001357760 0.0000414298 0.0003397228 0.0011193327 0.0003317668 0.0003703086 -0.0001623877 -0.0007928645 -0.0003945311 -0.0011263308 -0.0007163709 -0.0000907122 -0.0005720050 0.0008970034 -0.0002228309 0.0021484960 -0.0002824017 -0.0004079760 0.0010956216 -0.0005538519 -0.0009333087 -0.0008277217 -0.0001286736 -0.0006303019 -0.0006007277 0.0002400663 -0.0001158083 0.0024641764 -0.0005564955 0.0005131811 0.0003707188 0.0001961696 -0.0050313667 0.0015298594 0.0002916099 -0.0004485848 -0.0096481187 0.0060623223 0.0001630568 -0.0001251361 0.0000404139 0.0000134159 0.0000088010 -0.0001390579 -0.0003837772 0.0000279887 0.0000146105 -0.0005279460 -0.0003274639 0.0002627273 -0.0001572705 0.0004063130 -0.0008978445 0.0009670159 0.0003920309 0.0010104894 0.0001145459 -0.0005899852 -0.0005169023 0.0002335119 0.0002074089 0.0000493132 -0.0000175552 0.0000385453 0.0001247211 -0.0003277850 0.0011317045 -0.0014583754 -0.0005512230 0.0004376441 -0.0010385826 -0.0000701254 0.0001262078 -0.0010112229 -0.0017898369 -0.0009091076 -0.0014079397 0.0036760757 -0.0003613080 0.0008317936 0.0036887404 -0.0003977173 0.0004524799 0.0026953458 -0.0009411590 -0.0016725971 -0.0004963188 0.0011233788 0.0010085299 0.0009615238 0.0004185817 0.0000743607 -0.0001300779 -0.0000086951 0.0001774438 -0.0001452574 -0.0000454872 0.0001710961 0.0001299514 -0.0001318078 -0.0002364989 -0.0009247997 0.0117518189 -0.0082898738 0.0412965668 0.0068522807 -0.0069531638 0.0420469315 0.0331850443 0.0062429121 -0.0062031236 0.0024261484 0.0026615301 -0.0527439419 0.0044865650 0.0267793598 -0.0386724209 -0.0287448082 0.0152147807 0.0533581943 -0.0042688721 0.0019945230 0.0536083626 0.0281349010 0.0007469045 0.0041189468 -0.0123618776 0.0081439953 -0.0615947488 0.0016389469 0.0238805747 -0.0411564475 -0.0416808177 0.0319515157 0.0381251824 -0.0165681318 0.0040144642 0.0307960583 -0.0417926544 -0.0107959987 -0.0030417206 0.0055275071 -0.0055808331 -0.0507865784 0.0107553931 -0.0220779462 -0.0301151032 0.0377834057 -0.0082316524 0.0421555621 -0.0158340767 0.0014919452 0.0384474723 -0.0510022193 0.0015880971 0.0047356191 0.0075436418 -0.0083165406 -0.0618819541 0.0071338964 -0.0157923383 -0.0344995280 0.0513831270 -0.0244385132 -0.0020698113 0.0062269668 0.0085055164 0.0084278424 0.0081157609 0.0012087451 -0.0029561580 -0.0048994515 -0.0080989831 0.0061675884 -0.0087330137 -0.0014356971 -0.0304934879 0.1186677544 -0.0379013086 -0.1001736299 0.0580202422 0.0527014953 0.0422406713 0.1751079553 0.0197019206 0.0589160586 -0.0564685783 -0.0949480780 0.0096363915 0.1883187864 0.2330200288 0.0425733932 -0.1413441987 0.0160639108 -0.1172551602 -0.1220548271 0.0027859403 -0.0186087552 -0.0659094684 0.0313575792 0.0114408979 -0.1489138699 0.0771737281 0.0337244122 0.0981028408 0.2378434569 -0.1122343763 -0.0179687570 -0.0511320257 -0.0695596953 -0.0985652578 0.0376075342 -0.0734631504 0.1556367541 0.0042301868 0.0064718625 0.0659343897 -0.0307195385 0.0542071469 0.1423155448 -0.0785966892 0.0066346194 -0.1019099249 -0.2485537873 -0.0135076130 -0.1770796379 -0.0261901888 0.0715836437 0.0302253259 0.0978181280 -0.0408930529 -0.1747371992 -0.2430359827 0.0825926789 0.1187170674 -0.0118281456 0.0000661203 0.0000390207 0.0000498049 -0.0000318900 0.0002847805 0.0002055178 0.0000162216 0.0001989124 0.0002451691 -0.0003276727 -0.0001715923 -0.0002188963 0.0000418630 -0.0000848481 -0.0000364656 -0.0000072794 0.0000716180 0.0001229673 -0.0003706124 -0.0000290639 0.0001892501 -0.0002815682 -0.0002282433 -0.0003448044 -0.0683886401 -0.1190099215 -0.1807217930 0.2567576779 -0.2188879956 0.1607038361 0.0515932949 -0.1648067443 -0.0085731021 -0.0071741323 -0.0460797925 0.0532160427 -0.0380373221 -0.0810566743 0.0629170184 0.0126052432 0.0635193400 -0.0586549848 0.0367536140 0.0201077801 -0.0669241110 0.0896668041 0.1572762370 0.0054705879 -0.0200112431 0.0995436300 0.2011356482 0.2758532659 0.1573611594 -0.1980859327 0.0084757217 -0.0323040591 -0.1638843382 0.0316148162 0.0583579709 0.1708267596 -0.1000690200 -0.0025751026 -0.0043262852 -0.0060782058 0.0456136465 0.0484051862 -0.0208760418 -0.0361414567 -0.0664066383 0.0089069451 -0.0211517981 0.0061055347 0.0112810500 -0.0072604579 -0.0027637940 -0.0014720775 -0.0081236547 -0.0020671012 0.0026131411 0.0078740823 -0.0038361164 -0.0087210890 -0.0001892858 0.0065061501 -0.0049390153 -0.0023764114 -0.0046631638 0.0101940147 0.0052599719 -0.0093885078 0.0050015374 0.0021526096 0.0058434434 -0.0097081416 -0.0002992849 0.0055894954 -0.0050369095 -0.0032960564 0.0118235775 0.0228806613 0.0019576115 -0.0007264899 0.0055038839 0.0045797631 -0.0027005320 0.0103787582 0.0043928757 0.0028153221 0.0104376561 0.0065457250 -0.0000909116 0.0074549858 -0.0013656999 0.0029628679 -0.0065254103 0.0025925441 -0.0051853282 0.0005718870 0.0114577436 0.0051115526 0.0035256548 0.0016099811 -0.0072478263 0.0001236452 -0.0117609085 -0.0066817970 -0.0020816667 -0.0108494099 0.0111358999 -0.0087524802 0.0297452980 -0.0078269272 -0.0228755441 0.0307159907 -0.0154668509 -0.0093228537 -0.0031176971 -0.0018657456 -0.0074491486 -0.0061343018 0.0076659576 -0.0080229320 0.0336609419 -0.0130631679 -0.0029657619 0.0033544187 0.0194390857 0.0363487261 -0.0308593104 0.0137347850 -0.0163739870 0.0053948476 -0.0029590290 -0.0001741912 -0.0005441877 0.0003330366 -0.0001230484 0.0019231948 -0.0016860000 -0.0016691926 0.0005452681 -0.0003905339 -0.0022133715 -0.0026074929 -0.0000644207 0.0170800200 -0.0022826814 -0.0082796561 -0.0021330460 -0.0012451861 0.0228296889 -0.0130721194 0.0033271313 -0.0145748469 0.0020695906 0.0015985944 0.0008977664 0.0002132973 -0.0001986710 0.0000238405 -0.0425178307 0.0541120015 -0.1014539203 -0.0396734795 -0.0004211290 0.0232229337 -0.0231563096 -0.0225692658 0.0872200008 -0.0674222319 0.0012818905 -0.0790847887 0.1368013069 -0.0015320293 0.0241053717 0.0210651822 -0.0077504545 -0.0431863894 0.0374200626 -0.0162855955 0.0192307778 -0.0599829894 0.0326019234 0.0985656684 0.0884725546 -0.0340987102 -0.0321443159 -0.0012207895 -0.0005411868 0.0004449966 -0.0015814462 -0.0001736695 0.0010339182 0.0016224919 -0.0020369683 -0.0025854241 -0.0361591540 0.0000818607 0.0066924298 0.0655458967 0.0178186925 -0.0509084823 0.0873936395 0.0154120680 -0.0175082879 0.0291282406 0.0342286504 -0.0232776757 -0.0447216031 0.0125787997 0.0627511313 -0.0442351651 0.0150944768 0.0434092956 0.1351475594 0.0291332582 -0.0244237088 0.0980833865 -0.0279254515 0.0112774195 0.0105750145 -0.0057400608 0.0112701659 -0.0714200703 -0.0788197435 0.0836525511 -0.0062773088 -0.0247639702 0.0504374029 0.0545666088 -0.0376166396 0.0313044815 0.0694457983 -0.0433657377 0.0006109937 0.0108666342 -0.0220802872 0.0092178752 -0.0513127092 0.0138152874 -0.0501433567 -0.0468377538 0.0168645844 -0.0287943012 0.0840273855 -0.0665265090 0.0184713561 0.0920360628 -0.0216805548 -0.0062638663 0.0052200015 -0.0018591225 -0.0100223352 -0.0643889702 0.0652274827 -0.0496055400 -0.0338024049 0.0268284054 -0.0313286030 -0.0351948149 -0.0046177013 0.0021070013 -0.0061533556 0.0071896170 0.0283604387 -0.0198119976 0.0088480474 -0.0047154154 -0.0026346018 -0.0054979734 -0.0184780341 0.0116078100 -0.0159178478 -0.0127553862 0.0488067412 0.0248287388 -0.0258239121 -0.0461760523 -0.0455751287 -0.0001439022 -0.0574455738 0.0165040047 0.0559031604 -0.0455234958 -0.0460918531 -0.0358774511 -0.0454446471 0.0234774846 0.0629207487 0.0895611264 0.0978878278 -0.0229549195 0.0075498615 0.0140416469 -0.0211422477 0.1202761478 0.0930494176 -0.0226915373 0.0324062900 -0.1257333456 -0.0745840173 0.0535127794 -0.0298823638 0.0308485289 0.0076599145 0.0392129459 0.0185707500 0.0578304140 -0.1281324529 0.0300412156 0.0139951763 -0.0317168110 0.0221069756 0.0744053239 -0.1323525550 0.0114516074 0.1059285059 0.1069426291 0.0617497211 -0.0300076016 0.0762093656 -0.0057831495 -0.0839462636 -0.0077971315 -0.0584717908 0.0104494211 0.0721507003 0.0244604452 -0.0692380213 -0.0194400133 -0.0744852547 0.0002988595 0.0004278998 0.0003316973 -0.0004791455 0.0009082461 -0.0008893065 0.0017561015 0.0022872231 0.0015263732 -0.0000902317 0.0006988303 -0.0004429924 -0.0009112366 -0.0030234014 0.0008287720 0.0012769930 0.0010581577 0.0046603153 -0.0078458915 0.0000094519 0.0027515573 -0.0006103274 -0.0020275904 -0.0012193256 0.0033664770 0.0067276929 0.0111074311 -0.0132579891 0.0142031553 -0.0104379532 -0.0023380149 0.0112430249 0.0003020468 -0.0013211005 0.0017440711 -0.0044041338 0.0006148936 0.0043006169 -0.0039591259 0.0008380719 -0.0061033535 0.0038065793 -0.0002826778 -0.0031986517 0.0040195896 -0.0059331184 -0.0080714636 -0.0009227175 0.0016782256 -0.0080743845 -0.0099476575 -0.0183609474 -0.0077384934 0.0079278427 0.0000289265 0.0045145241 0.0079809672 -0.0007397875 -0.0037635488 -0.0082351292 0.0053374270 -0.0000371615 0.0007480997 0.0012497063 -0.0029509835 -0.0033688510 -0.0001418122 0.0019536607 0.0032137995 0.0000335863 -0.0017575168 0.0018953014 -0.0006877133 0.0003387910 0.0001957939 0.0002436126 0.0003608776 0.0001853042 -0.0001692578 -0.0005308854 0.0002165795 0.0005280163 0.0000457414 -0.0006634323 0.0001239011 0.0001781329 0.0001881816 -0.0005213352 -0.0005189251 0.0006883984 -0.0000098102 -0.0001945674 -0.0003785284 0.0001738048 0.0002689885 -0.0009078887 -0.0001471583 0.0004708659 -0.0011323140 -0.0013721163 -0.0000527778 0.0001974108 -0.0006922829 -0.0000841154 0.0002832363 -0.0004739794 0.0013095536 -0.0002995464 -0.0013359960 0.0031653322 -0.0012455480 0.0000581419 -0.0016710685 0.0007370934 0.0011917913 0.0000504337 -0.0000149147 -0.0012114759 -0.0016325257 -0.0008265109 -0.0003210082 -0.0007003656 0.0012438920 -0.0010524999 0.0035752467 0.0001859192 0.0005230719 0.0014240211 -0.0017451485 -0.0006527476 -0.0031102729 0.0006104110 0.0023027600 -0.0025046393 0.0026062006 0.0047269641 -0.0040709520 0.0009317256 0.0030132584 -0.0002736297 0.0000944061 0.0037775337 -0.0078568442 0.0019147709 0.0000938396 -0.0002032528 -0.0012291533 -0.0017737721 0.0018403207 -0.0006401035 0.0041312711 0.0008354052 -0.0002798983 0.0000509042 -0.0000542934 0.0003956974 0.0000774148 0.0016772648 -0.0014634710 -0.0012366762 0.0013954999 -0.0013716118 -0.0052407744 -0.0028233710 -0.0053288082 0.0634353392 -0.0177706570 -0.0083946491 -0.0148626857 0.0003968634 0.0649650542 -0.0467452354 0.0208806436 -0.0527785789 0.0019587048 0.0016259510 0.0010251340 -0.0000541934 -0.0004578051 -0.0001731643 -0.1445247283 0.1795131218 -0.3327681806 -0.1401910716 -0.0118324225 0.1154405459 -0.0788239902 -0.0870410038 0.3295714859 -0.2217151306 0.0000632724 -0.2548750303 0.4186710206 -0.0107677845 0.0653832950 0.0548463756 -0.0198322939 -0.1297879701 0.1007423202 -0.0485813497 0.0989645116 -0.2149282240 0.1009730000 0.3525861431 0.3283611890 -0.1421938065 -0.1319135031 -0.0021445655 -0.0009369283 -0.0008801081 -0.0016684191 0.0004513596 0.0008611044 0.0020894258 -0.0033527288 -0.0019206342 0.0017218629 -0.0003357872 -0.0001548518 -0.0036002950 -0.0008290806 0.0022067712 -0.0045370363 -0.0012509461 0.0008111422 -0.0013435236 -0.0014177731 0.0010145708 0.0028001562 -0.0007127213 -0.0031636025 0.0024388949 -0.0003482432 -0.0023700332 -0.0070111238 -0.0010997743 0.0008139908 -0.0052017667 0.0005433913 -0.0001842365 -0.0005415495 0.0005617917 -0.0006300661 0.0043175170 0.0033818034 -0.0039570131 0.0008342423 0.0018467991 -0.0031994544 -0.0034355162 0.0018714113 -0.0031489132 -0.0044940393 0.0019139868 -0.0016965657 -0.0016708496 0.0034809805 -0.0017660923 0.0025328978 0.0010572931 0.0033937270 0.0017346166 0.0007884313 0.0035696595 -0.0107352552 0.0005507385 0.0006535400 -0.0065818617 -0.0031431713 0.0017933641 -0.0023319810 -0.0027854114 0.0016375478 0.0016599646 -0.0088034648 0.0051062508 -0.0057179931 -0.0059690274 0.0061826541 0.0016278165 0.0000754232 -0.0001853330 0.0001901617 -0.0004786651 -0.0012943621 0.0037898165 -0.0003110029 -0.0009082133 0.0015941670 0.0012370604 0.0017333216 0.0000224497 0.0023612631 0.0012143579 -0.0036656379 -0.0010270412 0.0019233579 0.0029761349 0.0041582190 -0.0003570081 0.0045435775 -0.0018673701 -0.0033434214 0.0004970370 0.0047558504 0.0008559797 0.0029461879 -0.0025563661 -0.0046103016 -0.0058465811 -0.0066608490 0.0022460850 -0.0012283204 -0.0013832067 0.0012769716 -0.0077766458 -0.0064469576 0.0007262746 -0.0042899742 0.0087401425 0.0028917651 -0.0020848713 0.0026592665 -0.0012618783 -0.0010035176 -0.0004017970 -0.0012352650 -0.0029072769 0.0074248830 -0.0014916968 -0.0001324777 0.0007264854 -0.0008028260 -0.0054848567 0.0078089117 -0.0016047747 -0.0046748341 -0.0063192179 -0.0030464678 0.0011390608 -0.0035693606 -0.0000644895 0.0032819815 -0.0005586746 0.0025762553 0.0007649306 -0.0035162845 -0.0008689333 0.0023910354 0.0005345279 0.0031937848 0.0005540360 0.0006868727 0.0010786031 0.0003746499 0.0002228814 -0.0003263604 0.0013833675 0.0015697199 0.0016123289 0.0012747710 0.0015436286 0.0010627534 -0.0008137424 -0.0021565753 -0.0003015000 0.0017490657 -0.0022533951 -0.0001522938 -0.0058955060 0.0011551203 -0.0004557603 0.0018360174 -0.0030592686 0.0065891232 0.0014620130 0.0011117583 0.0017327186 -0.0019032486 0.0020548106 -0.0027432276 -0.0000780862 0.0015248701 -0.0002210614 -0.0007199497 0.0005446851 -0.0022106407 0.0001616627 0.0010035805 -0.0010040319 0.0001887263 -0.0027458086 0.0007961076 0.0005729474 -0.0011515433 0.0015286540 -0.0006180279 0.0013066146 0.0001130119 0.0023034581 -0.0027979936 0.0007161894 -0.0035150607 0.0015670541 -0.0008654549 -0.0005673136 0.0014857496 -0.0018434671 0.0004634844 -0.0011655314 0.0005129056 -0.0003614718 0.0001457423 0.0010419532 0.0002372241 0.0002297771 -0.0009941844 -0.0002682278 0.0001719487 -0.0003380821 -0.0005722901 0.0004933856 -0.0006795104 -0.0000245791 -0.0005082068 0.0002711410 0.0002036139 -0.0001435779 0.0000223872 -0.0002047806 0.0000561847 -0.0000156036 -0.0000258401 0.0000920099 -0.0003911040 -0.0000156174 0.0003888798 -0.0000026448 0.0001171020 -0.0000857625 0.0002919251 0.0002635838 -0.0002730509 -0.0000032923 -0.0002939010 0.0003743133 -0.0005401787 -0.0002031091 0.0005402150 -0.0001408626 -0.0000153774 -0.0000411133 0.0002057684 -0.0007237092 -0.0001746901 0.0001859414 -0.0004599755 0.0002791189 0.0001324607 -0.0011317672 0.0012585945 0.0004040443 -0.0002427884 0.0001801557 0.0006586016 0.0007228306 -0.0006608205 -0.0004998901 -0.0001218734 -0.0012779950 -0.0000057862 0.0003234948 -0.0000466820 0.0004325848 -0.0016704755 0.0035518947 -0.0005956721 -0.0012040470 0.0019321910 -0.0009395509 0.0042996278 -0.0072738674 0.0015314883 0.0072679439 -0.0095240057 0.0027439976 0.0051947768 -0.0063977153 0.0019500911 0.0033152794 -0.0032691616 0.0011549641 0.0076995959 -0.0118448884 0.0021737034 -0.0000399942 0.0000244178 -0.0001904947 0.0025059874 -0.0015621154 -0.0001101242 0.0053207351 -0.0001692215 -0.0002932882 -0.0012855831 0.0021640186 -0.0024476405 0.0090880528 -0.0035084865 0.0086630457 -0.0216410185 0.0004206970 0.0113452217 -0.0694769376 0.0110447532 0.0564922010 -0.0424154819 0.0783711137 -0.0596324093 0.0578361817 0.0383532397 0.0769536612 0.0715091450 -0.1408484252 -0.0981906549 0.0067094576 0.0100543662 0.0020802189 0.0005543534 0.0007112955 0.0002706506 0.0346513995 -0.1632167103 0.1358141222 0.0485918735 0.0866518328 -0.3606074016 0.0342651945 -0.0012465971 -0.1862002285 -0.1502412684 -0.0667033995 -0.1282341830 0.2784497765 -0.0621675617 0.0498065045 0.2993943456 -0.0361921409 0.0410460429 0.4958701308 -0.1692943105 -0.4147809862 0.0552767741 0.1400835844 -0.0453686800 0.0459650770 0.1214894965 0.0456537793 -0.0079927651 -0.0011861027 0.0040066665 -0.0056028684 -0.0000589324 0.0036207088 0.0072108323 -0.0082873037 -0.0100950321 0.0009617966 0.0003174410 -0.0003691614 -0.0007111945 0.0001895896 0.0009838461 -0.0008937646 0.0001336512 0.0007365956 -0.0010160668 -0.0003698537 0.0003542280 0.0000954276 -0.0003902324 -0.0009462537 0.0000730766 -0.0005270502 -0.0009777332 -0.0017816876 -0.0010310452 0.0009241617 -0.0002896605 -0.0000437538 0.0003944341 -0.0000411376 -0.0002568037 -0.0000740302 0.0012713613 0.0001116967 -0.0005938022 -0.0004155679 -0.0009735254 -0.0001474631 -0.0017646637 -0.0009745258 -0.0042075996 -0.0031621405 -0.0027464206 -0.0024331703 -0.0042177279 0.0023868426 -0.0008186779 0.0007921618 0.0024425948 0.0037432123 0.0002697332 0.0012662786 0.0039794099 -0.0052749318 0.0025293550 -0.0028133080 0.0032894995 -0.0004766629 -0.0009370709 -0.0012896750 0.0013058570 -0.0000892665 0.0024314965 -0.0023736608 0.0034915122 -0.0064565195 -0.0013490371 0.0030976853 0.0006840943 0.0002230382 0.0001384035 0.0003126182 0.0000644674 -0.0006080423 0.0010580783 -0.0028489106 -0.0011372616 0.0013634268 -0.0005411641 0.0026101028 0.0000380980 0.0008817866 0.0008475944 -0.0011195902 -0.0001661013 0.0003776735 0.0002211465 0.0020236387 -0.0001047674 0.0010896707 -0.0003234347 -0.0001766082 -0.0014783818 0.0024197691 -0.0010649991 -0.0002976290 -0.0011829041 -0.0008521568 -0.0012200795 -0.0020225558 0.0010167193 -0.0003359467 -0.0003881362 -0.0000694179 -0.0022668221 -0.0018898175 0.0000152438 -0.0019799212 0.0022426309 -0.0011299250 0.0005054798 0.0014970758 0.0002638111 -0.0010690485 0.0014826845 -0.0010162482 0.0007763793 0.0015374375 0.0000200779 0.0015962094 -0.0012014335 0.0010154387 -0.0021160395 0.0018445765 0.0000070665 0.0010393435 -0.0007126642 0.0024550352 -0.0016586951 -0.0009644428 -0.0008727061 -0.0016642878 -0.0013135173 -0.0011231045 -0.0007762339 -0.0010975096 0.0013179883 -0.0032150839 0.0013373172 -0.0008021256 -0.0012714447 -0.0018221969 -0.0035601712 0.0004603135 -0.0045656670 -0.0041611338 -0.0011870145 -0.0068412653 -0.0087393728 0.0034876800 -0.0015576050 0.0023179069 -0.0026638230 0.0006892250 -0.0002069807 0.0023792660 0.0053435831 0.0030013285 -0.0051382636 -0.0081356497 0.0060807391 -0.0009862851 0.0026665936 -0.0011466331 -0.0645358373 -0.0552417711 -0.1023833867 0.1291897923 -0.1025317290 0.1027775928 0.0207956848 -0.0728131001 0.0055321705 -0.0066724148 -0.0128223319 0.0356972829 -0.0139348029 -0.0366401540 0.0758989571 -0.0441659923 0.0545759266 0.0579131069 0.0289148277 0.0339494357 -0.0963036473 -0.1014649610 -0.1814181921 -0.0302575318 -0.1272221738 0.0267554814 -0.1796881471 -0.1406203853 -0.1806068937 0.0237443668 -0.0130185747 -0.0005212607 0.1874521941 0.0131898814 0.0289741542 0.0373639459 0.0409354198 0.0606154854 -0.1051696907 0.0207262172 -0.0392590541 0.0035549682 -0.0165842952 -0.0094430834 0.0344875482 -0.0001256339 -0.0016305443 0.0083964461 0.0000567888 0.0053965613 -0.0008430884 -0.0006252783 0.0035936987 0.0003488302 0.0004489003 -0.0042415968 0.0032225162 0.0022055797 0.0005468845 0.0016218638 0.0012457603 -0.0031227908 0.0000782755 -0.0073228971 -0.0017916233 0.0006938739 -0.0019727302 0.0004100369 -0.0011950523 0.0041725788 -0.0011307807 0.0028361225 0.0054754475 -0.0062403848 -0.0053510836 -0.0079105370 -0.0031136074 0.0002585147 0.0014073851 0.0026722636 -0.0004749640 0.0005645995 0.0008527618 -0.0018800420 0.0013681712 0.0013584557 -0.0050725217 -0.0140994821 0.0167500140 -0.0055768153 0.0101884571 -0.0113747022 0.0049512731 0.0060942211 -0.0156296569 0.0019056099 0.0066632805 -0.0124955720 0.0043104963 -0.0190055792 0.0282930180 -0.0053819433 -0.0178087642 0.0299759532 -0.0088691099 0.0765448411 -0.1153578443 0.0338465894 0.0812422539 -0.1034931307 0.0347780812 0.0311725790 -0.0403401695 0.0055993850 0.0324483304 -0.0385696805 0.0083027443 0.0865704812 -0.1282102688 0.0330210400 0.0034269379 0.0024255679 -0.0080882228 -0.0054062051 -0.0123708673 0.0013194400 -0.1115218689 0.1267331024 -0.0530293992 0.0005458420 0.0008149508 -0.0010238487 0.0023085093 -0.0050588122 0.0045121726 -0.0007110880 -0.0005931536 0.0010876925 -0.0047360992 0.0022851764 0.0046518158 0.0025370908 0.0073416923 -0.0031130468 0.0006401078 -0.0000430122 0.0047364844 0.0044733288 -0.0071410651 -0.0088791347 -0.0010911053 0.0004780824 -0.0008274455 -0.0008023028 0.0006713666 0.0006434557 -0.0070104733 -0.0094612880 -0.0059818821 -0.0047553077 0.0090624537 -0.0341276741 -0.0003839032 -0.0124424554 0.0132354024 -0.0112071492 -0.0003488938 -0.0151483924 0.0334149449 -0.0049376382 0.0035663905 -0.0040848106 0.0014089373 -0.0057019295 0.0287779834 -0.0107816202 -0.0187309844 -0.0011005368 0.0072372631 0.0056894566 0.0173293477 -0.0025636071 -0.0062409829 -0.0009762548 0.0005550863 -0.0002364004 0.0004695171 -0.0001077777 -0.0003201439 -0.0003290693 0.0000796186 0.0017180865 -0.0486350632 -0.0044039195 0.0099464219 0.0312616300 -0.0124262672 -0.0407863127 0.0357495108 0.0003566435 -0.0380405043 0.0464610811 0.0169644497 -0.0172667451 -0.0146457361 0.0273474436 0.0471383616 -0.0053815744 0.0175174511 0.0549123553 0.0960376732 0.0134490600 -0.0216586829 0.0125276952 -0.0082930646 -0.0107718192 0.0175523219 -0.0088952039 0.0031517776 -0.0700590904 -0.0163671399 0.0379934415 0.0331097584 0.0136266543 0.0265606244 0.0089118522 0.0485827487 0.1609217527 0.0382057467 0.0909789025 0.1274769867 0.1385171744 -0.1049234277 0.0408359146 0.0712402919 -0.0637672791 -0.1114543752 0.0258031488 -0.1196957718 -0.1132365709 0.0745511425 -0.1683188940 0.1499018021 -0.1309314811 0.1072868011 0.0243823457 0.0017443716 -0.0605339782 0.0187738350 -0.0501722759 0.0456611562 -0.0620487351 0.1212762888 -0.2515184640 0.0557476941 -0.0339352833 -0.0065227435 -0.0111474492 -0.0162170781 0.0042024139 0.0308912252 -0.0679029591 0.0763033814 0.0528359915 -0.0640972401 0.0372731502 -0.0853695148 0.0142616113 -0.0150964318 -0.0092221944 0.0219228166 0.0204349764 -0.0161359276 -0.0142702807 -0.0458317302 -0.0117447902 -0.0181920566 0.0002956434 0.0226429253 -0.0072154195 -0.0483934474 -0.0242094837 0.0135818977 0.0239632136 0.0319695819 0.0463960122 0.0622789192 -0.0101073517 -0.0068904107 0.0069599551 -0.0092463592 0.0871935279 0.0551344877 -0.0011449534 0.0148561392 -0.0660560225 -0.0224809141 0.0194174423 -0.0200801057 -0.0310733788 0.0216997694 -0.0193796483 0.0706714409 -0.0530199714 -0.0417718153 0.0328306704 -0.0332670490 0.0186153910 -0.0677231631 -0.0002188791 -0.0471714662 0.0352321600 0.0178367189 -0.0220875559 -0.1957766993 0.1101374300 0.0765617307 0.0146245377 0.0501681187 0.0362558620 0.0935673030 0.1772596910 0.0743506700 -0.1473541660 0.1327764613 -0.1000019134 0.0747811672 0.0002777859 0.0000015267 -0.0003908808 0.0009619407 0.0001433897 0.0016363984 -0.0012359012 -0.0021914955 -0.0019806623 0.0000958504 -0.0013147728 0.0008168082 0.0006822060 0.0012152277 -0.0020024172 0.0017649145 -0.0024545917 -0.0060372933 -0.0025684798 0.0003049653 0.0007306623 0.0012675924 -0.0018715739 0.0042282017 0.1271992215 -0.0303644723 -0.1918580891 0.0887659720 -0.2348861151 0.0249011524 0.0447056942 -0.2242175067 -0.0249681689 -0.0235977079 0.0378481025 -0.0998153848 0.0576123827 0.0359076286 0.0701470780 0.0001619813 -0.0396491989 0.0723880990 0.0003315107 -0.0147891074 0.0370256586 -0.0391957186 -0.0521295254 0.0049194980 0.0476505008 -0.0626191458 -0.1061416217 -0.1534658261 -0.0513976247 0.1114579780 -0.0070030855 0.0294761978 0.0349464263 0.0142512411 0.0127995314 0.2011216802 -0.0277089797 0.0629157088 -0.1133604494 0.0121094445 -0.0100408985 0.0340275192 -0.0329258654 -0.0315303164 -0.0029236955 0.0096907975 -0.0673278181 0.0504587657 0.0079904961 0.0075036031 -0.0030343435 -0.0003696936 0.0000149027 0.0019772525 0.0023765080 0.0020245940 -0.0008575336 -0.0051480865 0.0020817605 0.0105315901 -0.0019904505 -0.0035747211 -0.0023520004 0.0056825002 0.0006069557 -0.0053046222 -0.0007438910 0.0018804013 0.0048339265 -0.0041844754 0.0035174973 0.0121086181 -0.0057252213 -0.0006677626 0.0003598545 -0.0003318210 0.0078470731 -0.0090951373 0.0017878342 0.0115989907 -0.0097112690 0.0101670406 0.0004455458 0.0006149107 0.0058561474 0.0156595081 -0.0132081890 -0.0025645190 0.0058190732 -0.0012134986 0.0005006854 -0.0006517428 -0.0005285284 0.0013604283 -0.0014786184 0.0026685091 0.0003646524 -0.0007508129 -0.0014320568 -0.0083942712 0.0081732591 -0.0047276378 -0.0077215049 0.0081049892 0.0010965300 0.0276378806 -0.0367881940 0.0106542053 0.0343724738 -0.0445450590 0.0136173859 0.0238436312 -0.0381084822 0.0054787857 0.0200920998 -0.0292697637 0.0110111757 0.0428742284 -0.0527556325 0.0117205779 0.0002038291 0.0005890459 0.0028279390 -0.0017171663 -0.0245300149 0.0072473990 0.0405294675 -0.0273596759 0.0131461640 0.0024177785 -0.0023050180 -0.0009206140 0.0074203743 -0.0119215501 0.0064869213 -0.0021615978 0.0020276770 -0.0016129071 0.0001755886 0.0006790006 -0.0018647650 0.0012898246 -0.0038246939 0.0050250360 0.0004168342 0.0025310934 -0.0032985823 -0.0003665345 0.0044922456 0.0000644760 -0.0022411250 0.0022444074 -0.0013388920 -0.0019511081 0.0008447032 0.0016405801 -0.0001552998 0.0013183401 0.0012156631 -0.0010804065 -0.0042097791 0.0156399013 -0.0003272123 0.0000228011 0.0068844086 0.0023106878 -0.0051597819 0.0084443827 -0.0155060347 -0.0036421744 -0.0054315703 0.0094676285 -0.0004851568 0.0093508127 -0.0153541893 0.0044617079 0.0152573606 -0.0011640773 -0.0072937866 0.0018724108 0.0065511880 -0.0098428375 -0.0078585862 -0.0040938678 0.0005340084 0.0035313703 -0.0009877325 -0.0004378021 0.0009185552 -0.0008621821 -0.0007461036 0.0017263964 0.1410422620 0.0941422065 -0.0700828621 0.0113936434 0.0694778226 0.1589865178 -0.0052075545 0.1098337906 0.1253011802 -0.1642935235 -0.0589710762 0.0519554148 -0.0900287553 -0.0576034275 -0.1011318443 -0.0575989407 -0.1214114795 -0.1005262724 -0.1052088386 -0.1305774813 0.1750601548 0.1561179886 0.0654083943 0.0282099615 -0.0222648567 -0.0625226416 0.0155560821 0.0568118722 0.0252669658 -0.0650513855 -0.1778778815 -0.2027099245 0.0794414260 -0.0317273987 0.0046335990 -0.0471924803 -0.0413338472 0.0050860277 -0.0358178555 -0.0418682637 0.0321623697 -0.0150052809 0.0168615015 0.0111067248 0.0530501498 0.0140252617 0.0136307690 0.0547625040 -0.0703470151 0.0699519434 -0.0340109189 -0.0133476583 -0.0054974414 -0.0120632555 -0.0094771777 0.0110790121 0.0017954413 0.0702439287 -0.0341886367 0.0307802972 -0.0070951133 0.0461773057 0.0141275807 0.0945273749 0.0518677325 0.0513263191 0.0631550665 0.0238167449 -0.0941130806 0.0278191161 -0.0215756751 -0.0119429233 0.0175871880 -0.0041073718 0.0310989364 -0.0232829407 -0.0122992348 0.0747909907 -0.0243066388 -0.0104269520 -0.0359933710 -0.0857161269 0.1055715071 0.0113382416 -0.0383125692 0.0540512886 0.1011608993 -0.1539522107 0.1216310626 -0.1573993060 -0.1607816532 -0.0508091002 0.0877318255 0.0474073798 -0.0487529767 0.0343697094 0.0372236961 0.0069199381 -0.0737407814 -0.0001284327 -0.0377500258 0.0395405769 -0.0265643699 -0.0302029579 -0.2099455003 -0.0106158725 0.0244329023 -0.0117502183 -0.0157201860 -0.0047246317 -0.0098827813 -0.0187633465 0.0628867006 -0.0069495404 0.0096612171 0.0018011951 -0.0066965236 -0.0597548256 0.0685422244 0.0030034867 -0.0286723499 -0.0482344530 -0.0140728374 -0.0015756050 -0.0389920580 -0.0122071763 0.0122429296 -0.0068839045 0.0174092149 -0.0055630896 -0.0391681160 -0.0187356309 -0.0091345303 0.0221037943 0.0288094698 0.0001065210 -0.0012266022 -0.0017560593 -0.0022428858 0.0020918851 -0.0015085353 0.0002094519 0.0029487996 0.0023171964 -0.0043973738 -0.0025612371 -0.0065173396 0.0008811255 -0.0001122240 -0.0015174441 -0.0009628356 0.0019166298 0.0007163088 -0.0054381349 -0.0003375914 0.0024811578 0.0022092104 0.0006760068 -0.0014755717 -0.0015194297 -0.0012937228 -0.0000797553 0.0014638937 -0.0010813568 0.0001292928 0.0000953879 -0.0007102903 0.0001135673 0.0003233618 0.0002703203 0.0011735104 -0.0000973120 -0.0009536767 0.0007094094 -0.0021159337 0.0010195761 -0.0001023057 0.0002132112 0.0016006544 -0.0020159683 -0.0000771241 0.0005759695 0.0001905868 -0.0005029095 0.0011460648 0.0001676143 0.0008117361 0.0005992521 -0.0009437408 -0.0020257726 -0.0019977996 0.0007515798 -0.0000324262 0.0006762879 -0.0010420108 -0.0003552661 0.0005949267 0.0002165232 -0.0001752733 0.0006218969 -0.0006862048 0.0004986710 0.0001481009 0.0000738875 -0.0028747849 0.0253061364 -0.0222450190 0.0009761420 -0.0032888475 0.0019286958 -0.0008683354 0.0003515601 -0.0005642178 -0.0002508855 -0.0005479811 0.0004592261 0.0005477760 -0.0001958153 -0.0008781158 0.0005977521 0.0005934360 0.0004923654 -0.0014581406 0.0005630610 0.0005210004 -0.0004657396 0.0000163862 -0.0009753707 0.0039924705 -0.0035814640 0.0010130435 0.0043257439 -0.0024986268 0.0022960197 0.0006004578 -0.0024074844 0.0011998200 0.0013738216 -0.0025606840 0.0009724036 -0.0007401796 -0.0043409043 0.0024507448 0.0035239393 -0.0165296283 0.0116603556 -0.0056149886 0.0090526521 -0.0020557615 0.0039530991 -0.0068855018 0.0009097079 0.0052676022 -0.0066242720 0.0018274412 0.0054166194 -0.0064814390 0.0017726063 -0.0074622846 0.0119688563 -0.0027242998 -0.0096058455 0.0122370856 -0.0029578648 0.0359760615 -0.0480908563 0.0124083945 0.0330392834 -0.0488527219 0.0091642877 0.0073239941 -0.0099959847 0.0041073971 0.0086623990 -0.0131772634 0.0029603351 0.0357560565 -0.0527728400 0.0118545140 0.0001666141 0.0015932671 0.0003745297 0.0185403844 -0.0144563479 0.0000752783 -0.0000060146 -0.0002566480 -0.0001214480 0.0041354365 -0.0080541316 0.0061791845 -0.0224759113 0.0324047393 -0.0307757557 -0.0035645119 0.0052105443 -0.0102429042 -0.0401607450 0.0096675230 -0.0568355389 -0.0404020728 -0.1104751267 0.0843409505 0.1260939788 0.0814473670 0.0164140102 -0.0364603504 0.0056209465 -0.0293787242 0.0028482986 -0.0090183084 0.0052392738 -0.0002996112 -0.0011409006 0.0006998015 0.1188578697 0.0862554188 0.1781699923 0.1098071201 -0.1363933117 0.5093284352 0.0180725747 0.1884078908 -0.1930088918 0.0178421853 -0.1490158611 0.1030730853 -0.1421791772 -0.1330036511 -0.0519510295 0.5203367437 -0.0438151952 0.2840888124 0.0836466557 -0.0329445245 0.0189364021 -0.1241915076 0.0825376768 0.1797693701 0.1359768267 -0.0409117106 -0.0495791012 0.0062852849 -0.0003894691 -0.0065252915 -0.0024072211 0.0014989104 0.0022571495 -0.0027561467 0.0022743132 0.0007140081 -0.0026444874 0.0003654569 -0.0000183775 0.0003558075 -0.0013678523 -0.0014524994 0.0001026673 -0.0001891023 -0.0018965764 0.0023425107 0.0004053542 -0.0005287100 0.0000917163 0.0019483965 0.0014315899 0.0006506959 0.0009679513 0.0021586254 0.0034746816 -0.0023787769 0.0001736258 -0.0014350609 -0.0005270451 -0.0002779290 0.0013540870 -0.0016442374 0.0000046670 -0.0013549459 -0.0013734871 0.0019723069 0.0044136165 -0.0023303872 0.0022885556 -0.0004692390 0.0004200391 -0.0017226408 -0.0043550273 -0.0060439753 0.0015250592 -0.0012856907 -0.0004969000 0.0003384034 -0.0004050061 -0.0026491970 0.0021992547 0.0017856745 -0.0006353577 -0.0001077264 0.0087798339 0.0131298394 -0.0075979716 0.0071744379 0.0087546893 -0.0054588194 0.0050313223 0.0103995517 -0.0019764204 0.0065793134 0.0044996978 -0.0023303077 0.0080372100 0.0075979475 -0.0046707584 -0.0015022121 -0.0000577071 -0.0009676120 -0.0011688681 0.0005032116 0.0013453947 0.0002405872 -0.0022906043 -0.0000011308 -0.0024457418 -0.0023823152 0.0013922490 0.0003735114 -0.0002671460 -0.0006508120 0.0005322814 0.0006841425 -0.0000233874 0.0003499938 -0.0015957999 -0.0002968782 -0.0000656981 -0.0004449536 -0.0003138006 0.0010648627 -0.0017724024 0.0008428078 0.0015619080 0.0008077921 0.0001054334 0.0004465738 0.0015403991 -0.0004790557 -0.0005233539 -0.0000111359 0.0004084237 0.0019272721 0.0012695568 -0.0000284807 0.0004910017 -0.0010972073 0.0014138102 0.0010952006 -0.0000442859 -0.0000791897 -0.0000900863 0.0006547610 0.0006064938 0.0006692638 -0.0017249140 0.0014230345 0.0010793773 -0.0008283510 0.0001814683 0.0008300654 -0.0018198325 0.0004773604 0.0034487939 0.0010991386 -0.0009111668 0.0001054829 0.0012600361 -0.0004234955 -0.0013633076 -0.0001551731 -0.0000180735 0.0018934281 0.0011099138 -0.0014403284 -0.0009192599 -0.0001546909 -0.0008090787 0.0018089726 0.0028791388 0.0055702210 -0.0004660564 0.0059604890 0.0056098735 0.0027128698 0.0119589056 0.0144256260 -0.0054670309 0.0032873300 -0.0043291885 0.0003754437 -0.0013010925 0.0000879152 -0.0106446936 -0.0051749072 -0.0014583917 -0.0009002667 0.0078125735 -0.0037211992 0.0043808931 0.0029913539 -0.0000004855 0.0045084933 0.0029444395 -0.0087594433 -0.0029106061 -0.0071768425 0.0222817138 -0.0029549253 -0.0066029573 -0.0009805735 0.0036579000 -0.0007883571 0.0062735633 -0.0041842802 0.0065354801 -0.0042050859 0.0067264429 0.0072100869 -0.0032728216 -0.0028158748 0.0011315891 0.0046345442 -0.0052703149 -0.0187297641 -0.0044289993 -0.0135585387 0.0042486522 -0.0126280173 -0.0042874592 -0.0199394440 0.0139782814 0.0097864472 0.0064142490 0.0116487855 -0.0043623752 0.0024937911 0.0079352820 0.0043971856 0.0024344046 -0.0073020508 0.0015458535 -0.0047388350 0.0024348302 -0.0014945896 -0.0002982355 0.0046036893 0.0089745000 -0.0872030633 0.0785355133 0.0004633745 0.0122259579 -0.0093427003 0.0029237356 -0.0021158824 0.0003269217 0.0021528122 0.0048918027 0.0000849870 -0.0059026560 0.0006096357 0.0100119943 0.0000100149 0.0006648030 -0.0020009519 0.0082870898 0.0028474648 -0.0045313194 -0.0008382970 -0.0010970016 0.0078778082 -0.0165039994 0.0188463661 0.0067501127 -0.0109355393 0.0094075515 0.0002987442 0.0062365833 0.0073802225 -0.0049739263 -0.0030183943 0.0077742247 -0.0079839930 0.0016545038 0.0013850655 -0.0046584092 -0.0071561330 0.0255489739 -0.0230619371 0.0554913404 -0.0852612536 0.0201451463 -0.0297892537 0.0445855265 -0.0084931255 -0.0323986361 0.0472072954 -0.0124736011 -0.0475417732 0.0654762927 -0.0161470549 0.0676052762 -0.0963638703 0.0257986800 0.0757862681 -0.1051220632 0.0244144474 -0.3094737225 0.4270064168 -0.1163431811 -0.2415294869 0.3438429226 -0.0787043560 -0.0777222738 0.1152467105 -0.0290467948 -0.1199840047 0.1657944281 -0.0399154393 -0.3169745207 0.4551780586 -0.1063539124 -0.0027776398 -0.0081937992 -0.0025710987 -0.0676864496 0.0505301130 -0.0026774162 -0.0335112403 -0.0067924416 0.0053874836 -0.0000093269 -0.0018230731 0.0001269847 0.0078463657 -0.0069608758 0.0030358203 -0.0043865261 0.0046484783 -0.0039471178 -0.0087807986 0.0024666729 -0.0083675909 -0.0052052525 -0.0120676581 0.0125045872 0.0196339967 0.0056727688 0.0071275363 -0.0039817352 -0.0024744438 -0.0071484393 -0.0002863585 0.0036589279 -0.0002447782 -0.0006856362 -0.0004504949 0.0001858137 0.0135811075 0.0034528661 0.0274141581 0.0128146853 -0.0147474500 0.0496754933 0.0021052339 0.0136817785 -0.0157308175 0.0114008900 -0.0117512627 0.0128771844 0.0059462191 -0.0041732126 0.0044807499 0.0596489026 -0.0066644077 0.0201040082 0.0234981669 -0.0091763223 -0.0059258143 -0.0185645759 0.0156568336 0.0279739647 0.0239184532 -0.0047219129 -0.0075769676 -0.0042898030 -0.0006466025 0.0061005465 -0.0021218508 0.0001162960 0.0016288676 0.0003065399 -0.0021629018 -0.0028099236 0.0232081923 -0.0213122629 0.0116049644 -0.0012874053 0.0170439368 -0.0006668266 0.0102863471 -0.0133898113 0.0153892373 -0.0157243425 0.0072338825 -0.0030477087 0.0019605428 -0.0256666218 -0.0009967046 -0.0121909698 0.0014504083 -0.0164822960 -0.0374281690 0.0734544603 -0.0339484660 0.0135691952 0.0032511810 -0.0027618465 -0.0157077495 0.0385536650 -0.0013293978 0.0019809496 0.0034017736 -0.0114916772 -0.0578180507 0.0658026292 -0.0418107722 0.0086497671 0.0183064905 0.0129143062 -0.0092697781 -0.0067693182 0.0250669084 0.0258686962 -0.0024609975 -0.0004107251 -0.0063511818 -0.0265981826 -0.0097566702 0.0116318142 -0.0048422347 -0.0246981652 0.0615512772 0.0475246322 -0.0161125196 -0.0205592876 0.0113192312 0.0029685486 0.0218115874 0.0243680655 -0.0046186171 -0.0129051730 0.0041627388 -0.0103037855 0.0683307323 0.0330242274 -0.0319815885 0.0078919200 -0.0081557169 0.0086965361 0.0110758093 -0.0101155447 -0.0052622496 -0.0134013498 -0.0002058615 0.0110651686 -0.0152434618 -0.0044252774 -0.0089402091 -0.0050662411 -0.0061162096 -0.0012164385 0.0045571852 -0.0050116854 0.0003267613 -0.0040742039 -0.0026976792 0.0046375255 -0.0083476015 0.0071992392 0.0030869308 0.0042664797 -0.0046578117 0.0002720952 -0.0138424102 0.0029152745 0.0015488253 0.0047274113 0.0011466414 -0.0051507551 0.0096471159 0.0031694555 -0.0024250506 -0.0042163151 0.0033606180 -0.0052957402 0.0125068286 -0.0077720212 -0.0049682379 -0.0060247214 -0.0042099371 -0.0008625156 0.0043740495 -0.0092242701 0.0008300430 -0.0070636499 0.0021631337 -0.0059728153 -0.0116171114 0.0079579886 -0.0052523357 0.0037407248 0.0013699940 -0.0041430233 -0.0197037461 -0.0055311489 -0.0102508268 0.0083315426 -0.0012053661 0.0065468139 0.0152358787 0.0060497243 0.0069458147 -0.0006841369 -0.0000555247 -0.0014181185 0.0222109743 -0.0070888462 0.0067366999 -0.0010804259 -0.0022133723 -0.0026430626 -0.0033159001 -0.0010927695 -0.0061202173 0.0003912256 0.0023606375 0.0013900820 -0.0027960127 -0.0014879397 -0.0061328388 -0.0012927750 -0.0023953008 0.0026484930 -0.0022864871 0.0104729837 0.0153294072 0.0042181056 -0.0108421669 0.0033625689 -0.0060447285 -0.0010956717 -0.0066062245 0.0030628890 0.0035499777 0.0084840516 -0.0308996237 0.0001697613 -0.0199512248 -0.0069984139 -0.0056345974 0.0050002816 -0.0060672968 0.0068303484 -0.0072389396 0.0111289431 -0.0022334510 0.0094135617 0.0292399069 0.0320258557 -0.0488728543 -0.0343163048 0.0132916907 0.0366072947 0.0185674249 0.0025887255 -0.0053060450 -0.0106760322 0.0276157273 -0.0039801654 0.0268122230 -0.0036185446 0.0887198024 0.0197631021 -0.0018452620 0.0216087237 0.0055825942 0.0010011316 -0.0132676202 -0.0123814676 -0.0040077316 0.0032726199 0.0012670343 0.0063860584 0.0025625800 -0.0044628964 -0.0073196226 -0.0045413971 -0.0015437284 0.0196021586 -0.0203798902 0.0001667150 -0.0020214161 0.0020093137 -0.0005630340 0.0002262191 0.0005134363 -0.0003028149 -0.0003227874 -0.0008206280 0.0006939564 0.0001975900 -0.0013476216 -0.0003373664 -0.0001529510 0.0004336280 0.0000024223 -0.0003700868 0.0004918751 0.0003885160 0.0005668329 -0.0012938109 0.0026772301 -0.0036557420 -0.0008625664 0.0001971459 -0.0006048315 0.0002527161 -0.0002447796 0.0000376592 0.0003480227 0.0016385486 -0.0019554067 0.0008218839 0.0011422803 -0.0010471744 0.0019196695 0.0036642853 -0.0078461008 0.0072312844 -0.0131918271 0.0211993575 -0.0047110838 0.0065286768 -0.0102400488 0.0013832785 0.0071307316 -0.0096831915 0.0032356351 0.0122818000 -0.0163782686 0.0036040260 -0.0166679389 0.0229517930 -0.0068955085 -0.0189479847 0.0250975761 -0.0051093264 0.0770668148 -0.1049251602 0.0284613131 0.0576948387 -0.0822893034 0.0184174540 0.0201512920 -0.0310320566 0.0075089496 0.0322504695 -0.0458436445 0.0116653914 0.0795651154 -0.1121349956 0.0256452373 0.0001731653 0.0013786170 0.0023545755 0.0125118782 -0.0100342273 0.0015978073 -0.1470536901 -0.1210535731 0.0669389581 -0.0002183962 0.0009031479 -0.0002384580 -0.0019812895 0.0036976043 -0.0011775987 0.0007909123 -0.0024828155 0.0014254919 0.0040626804 -0.0007291310 0.0026744180 -0.0001210383 0.0082120754 -0.0081371842 -0.0088022551 -0.0081795713 0.0054168715 -0.0006399494 -0.0011338733 0.0013218570 0.0012593882 0.0000378701 0.0008352472 0.0003234302 -0.0000282560 -0.0001943285 -0.0075237946 0.0056545014 -0.0158662219 -0.0084803251 0.0096860728 -0.0356304093 -0.0038649819 -0.0202322594 0.0144111948 -0.0110318754 0.0166884690 -0.0250339489 0.0470894076 0.0101877417 0.0115953286 -0.0469331500 0.0039767736 -0.0341687804 0.0047222062 -0.0008095229 -0.0051228591 -0.0004548850 0.0038573567 0.0007918454 -0.0031128340 0.0047872100 0.0046853847 0.0003196301 -0.0001513634 -0.0012380911 -0.0007065249 -0.0000123740 0.0002629053 0.0008527730 -0.0006948086 -0.0011846953 -0.0175417821 0.0383767034 -0.0228663388 0.0032949193 -0.0189406585 0.0172792494 -0.0156986053 0.0296024494 -0.0084239424 0.0058742355 -0.0198544698 0.0121773252 -0.0066751476 0.0290281809 -0.0139378278 0.0160124572 -0.0167571445 0.0095557907 0.0353160729 -0.1070616214 0.0591394397 -0.0083770680 0.0125981260 0.0012084582 0.0138962302 -0.0525460122 0.0025571327 0.0070528173 0.0154249894 -0.0026743266 0.0607395010 -0.0996515928 0.0537911642 0.0487728965 0.0760568008 -0.0153067414 -0.0712144164 -0.0960658645 0.0749377718 0.0778422033 0.0443369451 -0.0248762696 -0.0670850667 -0.1295225013 0.0151839016 0.0625138145 0.0289812876 -0.0776943785 0.3527883432 0.4035280188 -0.1983384950 -0.0254538005 0.0168031600 -0.0023135363 0.1291077784 0.1920264096 -0.0407212992 -0.0119390874 0.0137423621 -0.0319601729 0.3817469818 0.3729970083 -0.2400638821 0.0002012882 0.0156165145 -0.0053286428 -0.0082662119 0.0136095841 -0.0040305983 -0.0463136516 -0.0475636937 0.0356985083 -0.0593127664 -0.0490524748 -0.0020340005 0.0014627179 -0.0122430559 0.0038853983 0.0032535071 0.0022384243 -0.0068470815 -0.0011817664 -0.0180327341 -0.0056529711 -0.0004020622 0.0014781802 0.0051565697 0.0081010768 -0.0208260869 -0.0154019735 0.0100967489 0.0102897635 0.0062956250 0.0110513789 0.0111431019 0.0002618811 0.0005562654 0.0038255126 -0.0052621950 0.0145971837 0.0110788908 0.0066615164 0.0032404237 -0.0099307279 -0.0104137346 -0.0241460672 -0.0209671299 0.0155204086 0.0203791752 -0.0220014749 -0.0159723842 0.0015867079 -0.0141971538 -0.0250083751 -0.0319981953 0.0204642938 0.0041761144 0.0427694316 -0.0182126517 -0.0224694311 -0.0549404599 0.0106549762 0.0269881399 0.0056922926 -0.0021313998 0.0244651534 0.0359960008 0.0155549456 -0.0067853978 -0.0389414894 0.0023362352 0.0448479937 0.0458812339 -0.0082759651 -0.0022770233 0.0005191196 0.0009440298 0.0009870304 0.0015012982 0.0001841401 0.0021360910 -0.0000345892 -0.0012073493 -0.0010087266 0.0015746696 0.0007124373 0.0027240041 -0.0001107616 0.0000805281 -0.0006540604 0.0015224806 -0.0021330519 -0.0030299793 -0.0025990046 0.0022562453 -0.0003178356 0.0007129629 -0.0006165555 0.0018484682 0.0240298683 0.0170577779 -0.0142718803 -0.0156842720 -0.0125940516 0.1060427418 -0.0165171957 -0.0099417184 -0.0090499700 0.0331655267 0.0003149545 0.0436535338 -0.0260643949 0.0376736436 -0.0551865427 0.0053580653 0.0126307915 -0.0163318801 -0.0026662445 0.0067299898 0.0057470104 0.0132599330 -0.0053972568 0.0012086083 -0.0089035918 0.0155904902 0.0127660127 0.0439086585 -0.0086276751 0.0097458646 0.0027155470 0.0028877653 -0.0034017029 -0.0214106616 0.0149752601 0.0297300657 0.0027525487 -0.0086053731 0.0043377230 0.0058041949 -0.0058908487 -0.0026520908 -0.0042333191 0.0018705405 -0.0028537633 -0.0009923375 0.0118526479 -0.0102720311 -0.0015698525 -0.0016881523 0.0016008505 -0.0021448844 0.0014325863 -0.0004994162 0.0011803755 -0.0026207171 0.0004972760 0.0026987251 -0.0010886382 -0.0028640434 0.0000871975 -0.0020795774 0.0008103983 -0.0037856838 0.0003529001 -0.0004937021 -0.0004993451 0.0019162885 -0.0031435276 0.0055151618 -0.0078528623 -0.0026054642 0.0052990300 -0.0062307854 0.0016364237 -0.0043992982 0.0009021323 -0.0009686048 0.0000594839 0.0025736610 -0.0005237107 -0.0003700956 -0.0043118423 0.0030274663 0.0026146701 -0.0120930753 0.0080451106 -0.0244783037 0.0357333758 -0.0078975595 0.0118065997 -0.0169518561 0.0018492872 0.0140123682 -0.0238124764 0.0054489087 0.0184701439 -0.0254518679 0.0082231457 -0.0254967619 0.0414929874 -0.0089093938 -0.0313981480 0.0437434813 -0.0115500802 0.1300675761 -0.1835829279 0.0492513864 0.0991854308 -0.1425749792 0.0327324629 0.0374866958 -0.0503848524 0.0154114707 0.0539669455 -0.0708695917 0.0185752738 0.1307022695 -0.1932956245 0.0438614724 0.0017238281 0.0010801486 0.0020606763 -0.0146660369 0.0152315138 0.0015813287 -0.0311234261 -0.0086103435 0.0054287318 0.0011155388 0.0001010099 -0.0005671550 -0.0006903595 0.0003789516 -0.0000772446 0.0002050300 -0.0016790075 0.0007574297 0.0020491037 -0.0002429620 0.0019786695 0.0011298383 0.0034511707 -0.0035706567 -0.0048025363 -0.0023423922 -0.0001441718 0.0003351397 -0.0001673346 0.0010998357 0.0005317604 0.0001389116 0.0002090992 -0.0002101590 0.0003449342 0.0004867888 -0.0039952305 0.0013349491 -0.0085961885 -0.0038954613 0.0041959223 -0.0144767563 -0.0013139970 -0.0061810596 0.0064742139 -0.0037802882 0.0059444604 -0.0080439142 0.0093634449 0.0012102468 0.0009903632 -0.0204169966 0.0025468959 -0.0082625426 -0.0007981131 0.0006465411 -0.0012033764 0.0020717322 -0.0005045639 -0.0030542290 -0.0036075790 0.0021020407 0.0022861892 -0.0003258236 0.0001261309 -0.0005912743 -0.0005464504 -0.0001040382 0.0004082910 0.0004130535 -0.0003859250 0.0000669687 0.1179354655 -0.1415225257 0.0770905039 -0.0177686436 0.0894195144 -0.0251408105 0.0544878882 -0.0994695137 0.0746295147 -0.0716378622 0.0617611046 -0.0313632823 0.0242923520 -0.1433909377 0.0152193316 -0.0680274867 0.0316339330 -0.0847017232 -0.2157172155 0.4352864722 -0.2194080020 0.0531656210 -0.0055712191 -0.0108363826 -0.0708153242 0.2185864240 -0.0100770695 0.0121995106 -0.0201870089 -0.0355441229 -0.2969271753 0.3845875972 -0.2410373709 0.0099590034 0.0120004154 0.0107273081 -0.0042661551 -0.0093393152 0.0216893115 0.0223667111 -0.0030153761 0.0008733837 -0.0112906975 -0.0222230065 -0.0114379092 0.0057251606 -0.0037311889 -0.0250531470 0.0652789109 0.0449017982 -0.0199378490 -0.0063781255 0.0131018105 0.0005267904 0.0216402232 0.0249286395 -0.0056513115 -0.0145664994 0.0166119342 -0.0146186776 0.0609435733 0.0409465142 -0.0395302866 0.0291853646 -0.0574027357 0.0364582089 0.0499034668 -0.0569201582 -0.0119037952 -0.0132920290 -0.0014123517 0.0094850234 -0.0133832650 -0.0059267310 -0.0082525214 -0.0292751985 -0.0196766952 -0.0186829914 0.0228895471 -0.0264774495 0.0176636813 -0.0092216794 -0.0053041385 0.0285079071 -0.0376891315 0.0302191407 -0.0035701364 0.0398359297 -0.0160033673 0.0438638491 -0.0596082697 0.0090297628 -0.0030884743 0.0027618953 -0.0054541856 -0.0308038879 0.0452531713 0.0109302412 0.0019160622 -0.0438969814 0.0053554437 -0.0355146996 0.0660659278 -0.0218054777 0.0163886539 -0.0118655192 -0.0049567409 -0.0000918636 0.0030531701 -0.0192480179 -0.0027913323 -0.0072708044 0.0083590756 -0.0086459693 -0.0135944304 0.0121256697 -0.0028680610 0.0120233455 0.0068604593 -0.0111517898 -0.0245980876 -0.0046804649 -0.0080977246 -0.0025743966 -0.0173370598 0.0049633546 0.0148555619 0.0071154126 0.0026165381 -0.0266417802 -0.0153019633 -0.0014377014 0.0165766284 0.0075105181 -0.0016588529 0.0005412662 0.0004560211 0.0005599597 0.0007755960 0.0013522615 0.0028193223 -0.0005945823 -0.0003281074 0.0002856059 -0.0007442552 -0.0004718156 -0.0000254109 0.0009430805 0.0014468907 -0.0011448179 0.0002688574 -0.0041519491 -0.0063553295 -0.0001096009 0.0047961859 -0.0020608480 0.0018033485 0.0005945440 0.0021962989 -0.0026852864 0.0001509403 0.0021569450 -0.0021230536 0.0007152383 -0.0003634183 -0.0019809144 0.0008084930 0.0012310540 0.0035500590 0.0054393028 -0.0000384712 0.0045955580 0.0003256780 -0.0018151398 -0.0043375092 0.0025975504 -0.0032259515 -0.0020636813 0.0071199514 0.0002031809 0.0009390425 -0.0016370570 0.0002597738 -0.0004265434 -0.0001279196 0.0024723161 0.0025872784 -0.0017552302 -0.0016745096 0.0000832509 -0.0035184454 -0.0009567045 0.0027123605 -0.0019598934 -0.0012756346 -0.0010953322 -0.0005944778 0.0019494052 -0.0026872415 0.0027164318 -0.0000400014 0.0111559196 -0.0008328177 -0.0044544661 0.0479329176 -0.3704993628 0.2933676185 -0.0771758933 0.1094167086 -0.0584183200 0.0183503958 -0.0059023055 0.0202745056 -0.0002154680 0.0168538088 -0.0191141758 -0.0002951475 -0.0008468601 0.0169070141 -0.0033480485 -0.0146049308 0.0013995816 0.0351081933 -0.0047013402 -0.0112422292 0.0023610879 0.0056388595 0.0095543860 -0.1015011965 0.0861491462 -0.0427789164 -0.1329317894 0.0927071347 -0.0601656934 -0.0309670402 0.0754692052 -0.0391340884 -0.0171359894 0.0395132057 -0.0250462902 0.0138075509 0.0130999425 -0.0060846644 -0.0340774739 0.1432103712 -0.0959648423 -0.0002121187 0.0034579910 -0.0026350748 -0.0087608171 0.0139333283 0.0040718174 -0.0062438652 0.0130244728 -0.0026515201 -0.0048752928 0.0054588598 -0.0057373670 -0.0106442786 0.0017732651 -0.0032425376 -0.0053167742 0.0122348475 -0.0014608239 0.0577039048 -0.0767460270 0.0246306834 0.0398965216 -0.0540307352 0.0093153354 0.0575026752 -0.0931077409 0.0143072895 0.0783354930 -0.1130509384 0.0200782120 0.0746523972 -0.0981432168 0.0304986520 -0.0024787559 -0.0364710412 0.0020977364 -0.4485151200 0.3567638905 -0.0001763257 0.0030068272 -0.0030526447 0.0013774577 -0.0329100340 0.0655660357 -0.0400554250 0.1615794465 -0.2489262837 0.2038017984 -0.0393049717 0.0663995382 -0.0656906253 -0.0045977004 -0.0084528232 -0.0341884102 0.0081470518 -0.0094532851 0.0452408242 0.0312783446 0.0081553779 -0.0033439315 -0.0351790649 -0.0025014243 0.0136293523 -0.0205075804 0.0636687266 -0.0361814333 -0.0061444225 0.0060395708 -0.0014127820 0.0002695633 -0.0526671801 0.0584488887 -0.0014715459 -0.0088299451 0.0002197201 0.0042541321 -0.0628210595 0.0876273875 0.0575525454 -0.0089761158 0.0538787277 -0.0469154878 -0.0104232917 -0.0092881859 0.0596568771 -0.0007878399 0.0498937396 0.0527609060 -0.0116367008 -0.0296161352 -0.0634736868 0.0710907300 0.0777161698 -0.0198791399 0.0495637042 0.0451561756 -0.0505841361 0.0014105726 0.0527449580 0.0131964355 -0.0154977573 -0.0152095082 0.0222326434 -0.0333433425 -0.0028679021 -0.0062517658 -0.0034298513 0.0026526349 -0.0001401659 -0.0065303211 -0.0082833323 -0.0024339918 -0.0045326125 -0.0084734931 0.0073395068 0.0044579846 -0.0027885983 0.0007122152 0.0060991992 0.0085064014 0.0019036840 0.0057003900 0.0080158435 0.0088706223 0.0001235287 -0.0065865342 -0.0104607963 -0.0093265186 0.0023259318 0.0033553528 -0.0059861245 0.0000266474 -0.0056673263 -0.0065351828 0.0102905378 0.0118973010 0.0044849078 0.0009786418 0.0003726324 -0.0026487285 -0.0049630607 0.0001404173 -0.0038758187 -0.0047384340 -0.0040574147 0.0032714434 -0.0011201445 -0.0004801574 0.0006719789 0.0053716208 0.0000984957 0.0015024055 0.0045349899 -0.0012166290 0.0033758439 -0.0048815386 0.0060835492 -0.0044387103 -0.0011734864 -0.0012957216 0.0032856952 -0.0004294865 0.0074003468 0.0029251310 0.0009898272 0.0025565819 0.0101843395 -0.0022988230 -0.0040677379 -0.0000096995 -0.0026800400 -0.0033779563 0.0007077872 0.0038630970 0.0019587719 -0.0023521189 -0.0023938194 0.0014438879 -0.0014300676 0.0033373800 0.0004013735 -0.0011552641 -0.0008403886 0.0008482573 0.0015538757 0.0003183554 0.0018384571 -0.0038476134 -0.0014142947 0.0016499197 -0.0013710437 -0.0017552715 0.0038066628 -0.0044292579 0.0005360316 0.0064769280 0.0026621867 -0.0010356015 -0.0007708430 0.0020307365 -0.0000100155 -0.0023453863 -0.0000982646 0.0013954688 0.0013837503 0.0016017309 0.0007523881 -0.0009868871 0.0005756451 0.0042182141 -0.0005502257 0.0012502899 0.0011146869 0.0000493180 -0.0010235379 -0.0011288227 0.0015805510 0.0003418222 -0.0003201131 0.0013951918 -0.0007438933 0.0014939352 0.0003974253 0.0004730268 -0.0000472137 0.0001684328 0.0005096511 0.0050238894 -0.0018932531 -0.0017295294 -0.0005365048 -0.0007394864 -0.0003705492 -0.0017657380 -0.0047093170 -0.0015668513 0.0033360284 -0.0036037157 0.0031460617 0.0001501763 0.0027680083 0.0000403431 -0.0099319003 0.0157399918 -0.0197465459 -0.0165885524 -0.0006643725 -0.0560043698 -0.0658451885 0.0542383445 0.0024140428 0.0543326713 -0.0253192213 -0.0039973180 -0.0024828609 0.0863107544 0.0041228844 -0.0181787295 0.0017437919 -0.0573871493 0.0115657961 -0.0799067412 -0.0783000490 0.0376545909 0.0613417171 -0.0020576821 0.1062616213 -0.0452647935 0.0527215318 -0.0896104587 0.0017321019 0.0377379109 -0.0217122530 -0.0349570023 -0.0888420530 0.0451180344 -0.1194508249 0.0045529035 -0.1038711540 0.1378837710 -0.0285894586 -0.1294957447 -0.0049344397 -0.0962034403 0.0620908001 0.0168144472 0.0413687257 -0.0233969900 -0.0574798064 0.0110761330 0.1188560191 0.0593036002 0.0429081884 -0.0652458924 0.0476939944 0.0454214179 -0.0021979317 -0.0241343212 0.0577193261 -0.0152369926 -0.0141365008 -0.0491134700 0.0496245268 0.0121047749 0.0015301938 -0.0068730381 -0.0131272583 -0.0034536936 -0.0150041126 0.0023797748 -0.0100860686 -0.0009736007 -0.0051198015 0.0063894607 -0.0034486648 0.0013336731 -0.0015456903 0.0019517414 -0.0026278111 0.0040879725 -0.0042312773 -0.0014507737 0.0004502258 0.0020621722 -0.0002605262 0.0003731818 0.0002820401 0.0050289701 0.0012490710 -0.0015588634 0.0014531581 -0.0006827640 0.0018954532 -0.0090286338 0.0072963371 -0.0022735201 -0.0108415856 0.0089470402 -0.0016227342 -0.0011774400 0.0088117012 -0.0052364475 0.0003616915 -0.0007875233 -0.0018203330 0.0044730093 0.0007132339 0.0010474931 0.0021287105 0.0070234313 -0.0026836456 -0.0040076486 0.0075816247 -0.0014789684 0.0003579373 -0.0008610632 -0.0002382509 0.0010438458 -0.0006596845 0.0009625028 0.0038574206 -0.0058709913 0.0007737037 -0.0051384457 0.0049360039 -0.0027371741 -0.0051254979 0.0061848156 -0.0001728728 0.0202813548 -0.0262626319 0.0064548334 0.0123255690 -0.0201590635 0.0027707080 0.0075419259 -0.0137124966 0.0021413580 0.0145753069 -0.0206921865 0.0066428255 0.0262706687 -0.0334130197 0.0074095520 -0.0015863176 -0.0018728607 0.0037115757 -0.0082740877 0.0079291364 0.0003079353 -0.0655538865 0.0551186983 -0.0245688306 -0.0017327059 0.0031837689 -0.0018904665 0.0075565316 -0.0112161168 0.0095452505 -0.0019071872 0.0032140353 -0.0032933966 -0.0052920233 0.0017673983 -0.0042332820 -0.0009555010 -0.0037024805 0.0070241743 0.0118918094 0.0007067108 0.0018473326 -0.0022965958 -0.0023497797 -0.0028723214 -0.0008651991 0.0030605078 -0.0015863253 -0.0002252548 0.0002236776 -0.0001123312 0.0064778565 -0.0061830502 0.0173573044 0.0072612462 -0.0044855887 0.0125380383 0.0033853996 0.0036369156 -0.0055099621 0.0175927309 -0.0029116976 0.0132012186 -0.0020677375 -0.0008804312 0.0015329099 0.0139400838 -0.0002212002 0.0115103025 0.0145878039 -0.0051400276 -0.0078625445 -0.0082027024 0.0094814899 0.0113722551 0.0077196828 0.0010676342 -0.0006792130 -0.0025668801 -0.0000452542 0.0025545324 0.0005072729 -0.0008093765 -0.0006687562 0.0011555085 -0.0017220990 -0.0003322036 0.0661634955 0.0517585602 -0.0400130122 -0.0108690090 0.0550800577 0.0865042656 -0.0105242841 0.0690062685 0.0795340490 -0.0990237687 -0.0161673192 0.0233947524 0.0046692147 -0.0149578153 -0.1025681368 0.0064224515 -0.0344764707 -0.0991171370 -0.0208115194 -0.1940064053 0.1641668629 0.1345257548 -0.0726723594 0.0837399598 -0.0078220465 -0.1207202023 0.0166418779 0.2069420064 -0.1147621467 0.0240386482 0.0469259841 -0.2578797365 0.0846473996 0.0316206993 0.0493537506 0.0855148042 0.0314165603 0.0580590366 0.0828295392 0.1026387417 -0.0306445598 0.0122425661 -0.0153557455 -0.0082762309 -0.1084806383 -0.0082852902 -0.0143637970 -0.1129450612 -0.0342917414 -0.2205363494 0.1461289211 -0.1900159089 -0.0895166262 0.0987909663 -0.0339852477 -0.1301028432 0.0303816041 -0.2578496162 -0.0883341717 0.0276577783 -0.0987375816 -0.2485524334 0.0575723842 0.0475777473 0.0525824936 0.0278055402 0.0154431732 0.0315746239 -0.0672858578 -0.0241036556 0.0707971576 0.0275466618 -0.0120604401 0.0381184834 -0.0694579088 -0.0261446370 0.0162112262 -0.0332929583 0.0219399629 -0.0309918806 0.0417173026 -0.0043038253 0.0264550022 0.0346129194 -0.0378861022 0.0174152430 -0.0218298853 0.0490340674 0.0171379291 0.1304434563 -0.0611034497 -0.0303927673 0.0185848230 -0.0041984583 -0.0157054649 -0.0393350240 0.0543127632 0.0028286403 0.0073682634 -0.0615155156 -0.0038656478 -0.0658130075 0.0784650027 -0.0160276141 0.0369988386 -0.0414074431 -0.0251081551 0.0549475225 0.0369421886 0.0046307130 -0.0474183550 0.0022196761 -0.0127773857 -0.0522975308 -0.0590572410 0.0242407380 0.0154569097 0.0686042510 -0.0199875755 -0.0895555506 -0.0994372970 0.0095846656 0.0578978223 0.0081424768 0.0177849575 0.0419166165 0.0507458880 0.0057423082 -0.0313677242 -0.0660232895 0.0252176291 0.1665871245 0.0525860998 -0.0465608701 0.0160124411 0.0002668169 0.0001558604 -0.0003214399 0.0007079572 -0.0006709534 -0.0008454883 0.0003520728 -0.0024464266 -0.0030695544 0.0027410656 0.0003054967 0.0027720082 -0.0013565056 -0.0006233943 0.0001961291 0.0031932814 -0.0016261736 -0.0019109503 -0.0011003169 -0.0013499430 0.0005114769 -0.0030825368 -0.0035387939 0.0023770325 0.0005963635 -0.0024914901 0.0016294822 0.0020227445 -0.0018988071 0.0010887169 0.0005584473 -0.0015333541 -0.0011586203 -0.0025726672 -0.0047381615 0.0051703875 -0.0085442157 -0.0008127610 -0.0022866813 -0.0060708917 -0.0001069614 0.0052011483 0.0000691802 -0.0027548972 -0.0064165820 0.0013536803 0.0076743239 0.0016493632 0.0035601580 0.0032429089 -0.0023416073 0.0020108826 0.0078909118 -0.0000774444 -0.0067938148 -0.0038583799 -0.0004679523 -0.0031996255 0.0056144053 -0.0010100180 0.0022808625 -0.0006679825 0.0001762504 0.0029074086 -0.0021594164 -0.0012257589 -0.0037630562 0.0031131002 -0.0000561569 -0.0572511885 0.2674786806 -0.1030057781 0.1358913383 -0.1691029008 0.1048449835 -0.0826612499 0.0616323979 -0.0514375935 0.1122604731 -0.1259804062 0.0986181779 0.0389301494 -0.0201502800 -0.0349392904 0.0308603588 -0.0494820842 0.0186220225 -0.1012583294 0.0136416169 -0.0070945518 -0.0871194503 0.0911498970 -0.0873104029 0.3944557650 -0.3791020817 0.1599314835 0.2323559446 -0.2144147418 0.0821686808 -0.1642472190 0.0163554350 -0.0518371365 0.0029333671 0.0216422673 0.0286087584 -0.0355936366 0.0097300593 -0.0086750225 -0.0068405600 -0.0566593473 0.0281364770 -0.0201726004 0.0295749999 -0.0029243413 0.0173738749 -0.0279845912 -0.0011431104 0.0135420513 -0.0237228663 0.0053989971 0.0185686061 -0.0142996338 0.0075622775 0.0053479604 0.0058272160 0.0015652248 -0.0000186404 -0.0045787195 -0.0000063628 -0.0459756043 0.0602026786 -0.0212510489 -0.0188280261 0.0444682149 -0.0005665511 -0.0867294649 0.1330347309 -0.0207485140 -0.1055448794 0.1501460564 -0.0293397319 -0.0819731560 0.1075505556 -0.0335119406 0.0354749271 0.0375157379 0.0071324770 0.2642976147 -0.2419283950 0.0412882767 0.0005654569 -0.0001372568 0.0000617727 -0.0235253287 0.0381393429 -0.0160273966 0.0489193823 -0.0797536669 0.0773973067 -0.0089075943 0.0247663211 -0.0216369584 0.0035891091 -0.0044091979 -0.0187368212 0.0087838771 0.0020202767 0.0219101861 0.0094123959 0.0011422367 -0.0049838773 -0.0257567495 -0.0090104723 0.0111217895 -0.0068303775 0.0182657515 -0.0133684763 0.0024690770 0.0000403399 -0.0064709518 -0.0080884274 -0.0353749784 0.0212334790 -0.0108937131 0.0043601300 -0.0330256920 0.0012761871 -0.0521684499 0.0697242314 0.0279043312 0.0000935126 0.0235481874 -0.0305496629 -0.0011885396 -0.0063066575 0.0113401207 0.0004497421 0.0153169651 0.0599933621 -0.0150066633 -0.0441698473 -0.0449600889 0.0639767898 0.0545587937 -0.0268053447 0.0529259763 0.0473847643 -0.0077626312 -0.0002870152 0.0100343757 0.0135124401 -0.0043093449 -0.0132593136 0.0093614757 -0.0094664758 -0.0004114994 0.0029567656 0.0017618473 -0.0015616066 0.0008889761 0.0041622735 0.0045164729 0.0019124060 0.0041308982 0.0046467972 -0.0049018298 -0.0005975621 -0.0000728147 0.0005212964 -0.0022993343 -0.0063406206 -0.0004007925 -0.0017368080 -0.0053476644 -0.0021982074 -0.0019138575 0.0053072992 0.0063856808 0.0034665213 0.0021368298 -0.0010797073 -0.0039151303 0.0012903516 0.0100749364 -0.0064069600 -0.0006300828 -0.0011313447 -0.0103807340 0.0036297925 -0.0010718597 -0.0013187131 -0.0000242107 -0.0007222916 -0.0012707615 -0.0004366963 -0.0017799584 -0.0015356950 0.0006742799 -0.0000430307 -0.0005324929 0.0008486792 -0.0002968702 -0.0009349239 0.0012564183 0.0057774951 0.0090646294 -0.0044334746 0.0072736016 0.0089935731 -0.0054239436 0.0031237361 0.0061687828 -0.0014055109 0.0074789639 0.0071737775 -0.0040176609 0.0051588302 0.0076039136 -0.0039474891 0.0017488232 0.0023350426 0.0020421225 0.0010674363 0.0011264082 -0.0029825330 -0.0006527105 -0.0020323655 0.0001392322 -0.0009074818 -0.0018356723 0.0010099483 -0.0017402742 0.0001895646 -0.0030708566 0.0032298709 -0.0009911055 0.0048496086 -0.0009406854 -0.0004088261 0.0010478505 -0.0039343594 0.0012539548 -0.0023418057 0.0083845915 -0.0022772193 0.0162240033 0.0015515509 -0.0016819805 0.0102205781 0.0007832776 0.0016823850 -0.0045367251 0.0035478900 0.0004578024 0.0000732560 0.0017817772 0.0016129967 -0.0031196054 0.0110997173 -0.0045292806 0.0099313861 0.0041841318 -0.0019596757 -0.0052572242 -0.0018430172 0.0031298600 0.0045095373 0.0005607624 -0.0049760697 0.0056121776 0.0035265213 -0.0018931683 -0.0009120921 0.0014565908 -0.0053054914 0.0061212580 0.0133159987 0.0033708891 -0.0089023491 0.0011010283 0.0043679250 -0.0012675846 -0.0048861040 -0.0000881584 0.0025129217 0.0127421896 0.0034183564 -0.0147250459 0.0010927397 -0.0016327302 -0.0070565102 -0.0010405389 0.0071227993 0.0017589848 0.0175644513 -0.0175230742 0.0008191492 -0.0054778444 -0.0388837839 -0.0429168166 0.0439138352 0.0141960388 0.0540301475 -0.0056612335 -0.0017529995 -0.0002812492 0.0416660708 -0.0008371837 -0.0097839311 -0.0025255567 -0.0112996153 0.0033387946 -0.0172011143 -0.0242505294 0.0127364184 0.0000482155 -0.0005503890 -0.0010642367 -0.0019174478 -0.0023351560 -0.0043620825 -0.0002692008 -0.0027443308 0.0004785023 0.0004958487 0.0034104501 -0.0020837983 0.0040439863 -0.0000208630 0.0017862548 0.0032029984 0.0006476768 -0.0087991891 -0.0015158852 0.0035678245 0.0038353798 0.0001102405 -0.0032314930 -0.0011902479 -0.0034686326 -0.0017019332 0.0059947332 0.0018550963 -0.0032377132 -0.0039959332 0.0045610449 0.0000414228 0.0010424457 0.0014052629 0.0008970314 -0.0002392205 -0.0038670747 -0.0025713328 0.0004661971 -0.0016977104 0.0017866094 0.0014770121 0.0121096779 -0.0036604752 -0.0040781303 0.0131580108 -0.2669763083 0.2681437903 -0.1134238092 0.1378249816 -0.0673669317 -0.0298198132 0.0369954888 0.0016848176 0.0950717120 -0.0683284181 0.0468811208 0.0347327535 -0.0244716086 0.0241012348 0.0442095633 -0.0681711866 0.0331494347 -0.0051763650 0.0173739219 -0.0304524595 -0.0961130167 0.0977361798 -0.0603698900 0.1097839730 -0.1163560340 0.0616200330 -0.1425259097 0.0871592220 -0.0714512680 -0.2336294798 0.2045425525 -0.1519876508 -0.0131732639 0.0568290897 -0.0376452016 -0.0092549375 -0.0342977290 0.0086555799 -0.0243307969 -0.0053401368 0.0003130696 0.0122410468 -0.0156220516 0.0077709667 -0.0113517180 0.0124025752 -0.0091745283 -0.0101166788 0.0123010173 -0.0012513957 0.0031067600 0.0156634419 0.0005528713 0.0075950641 0.0071427406 0.0065919347 -0.0066027417 -0.0002808366 -0.0000816630 0.0290855458 -0.0384386103 0.0082841040 0.0221388017 -0.0125990516 0.0041465902 0.0525639608 -0.0655399016 0.0372923998 0.0607758332 -0.0888418962 0.0245610450 0.0406283403 -0.0751381493 0.0120814457 0.0215236962 -0.0428126251 0.0131049290 -0.5513393394 0.3931102289 0.0340390240 0.0012589162 0.0001966551 -0.0001298599 0.0300003219 -0.0407471052 0.0146637813 -0.0416460088 0.0714458147 -0.0761796296 0.0059786995 -0.0260962545 0.0203996528 -0.0062708134 0.0059622074 0.0207042117 -0.0100659735 -0.0029274330 -0.0229072082 -0.0077794646 -0.0021892634 0.0067863755 0.0298928278 0.0111057568 -0.0142237126 0.0066795294 -0.0158468094 0.0139492458 -0.0046344395 0.0007962548 0.0086939746 0.0094376293 0.0385015150 -0.0211404494 0.0128582954 -0.0055922010 0.0379076287 -0.0014124627 0.0572117327 -0.0764991524 -0.0253217183 0.0025001364 -0.0245654285 0.0394651259 0.0031971495 0.0092154667 -0.0122164009 -0.0005421013 -0.0169213482 -0.0698944815 0.0172368029 0.0535297456 0.0505309429 -0.0748018819 -0.0605360986 0.0364011523 -0.0649182039 -0.0585632032 0.0016861025 0.0003564913 -0.0053735460 -0.0180268626 0.0043132861 0.0167885762 -0.0097693788 0.0077350891 -0.0008843894 -0.0028904995 0.0010045033 -0.0003770155 0.0018453598 -0.0052019664 -0.0023513631 -0.0010991129 -0.0028298522 -0.0035995181 0.0019275843 0.0034568030 -0.0024947479 -0.0007415472 0.0043330083 0.0035923638 0.0008015721 0.0028810093 0.0042801881 0.0020243983 0.0076440659 -0.0061392920 -0.0106100482 0.0030169589 -0.0010989291 0.0012215416 -0.0076536766 0.0005820538 -0.0002955083 -0.0099223647 0.0089689056 0.0084298878 -0.0046673269 0.0054796435 0.0010888074 -0.0002568251 -0.0012895665 0.0014805274 0.0000154517 -0.0011535141 -0.0003559076 0.0014402483 -0.0004023791 -0.0005118879 0.0011955546 0.0002212942 -0.0003668527 0.0013906956 0.0000442338 -0.0061865823 -0.0093374153 0.0031489202 -0.0024645280 -0.0082504866 0.0041847054 -0.0023011393 -0.0042672533 0.0007825168 -0.0040953500 -0.0038137315 0.0026838018 -0.0058807317 -0.0051569168 0.0033394131 -0.0013359603 0.0016090223 0.0001472476 -0.0014335664 0.0012876822 0.0003998502 0.0008128141 0.0010508084 -0.0006807309 0.0011979350 0.0011289955 -0.0001631150 0.0011822999 -0.0011195367 0.0018588982 -0.0014510162 0.0015743376 -0.0033334206 0.0002086896 -0.0015083867 -0.0008254756 0.0016275874 -0.0006617166 0.0018498055 -0.0043289914 -0.0006876418 -0.0099631026 -0.0006111907 0.0015722872 -0.0049829865 0.0013808012 0.0011567010 0.0018629554 -0.0015338758 -0.0000798439 -0.0006383502 0.0020797991 0.0010390825 0.0015303651 -0.0047175355 -0.0001866690 -0.0064184434 -0.0036891118 0.0011383936 0.0055569390 0.0019503958 -0.0013253856 -0.0042231606 0.0015460134 0.0015141674 -0.0041477942 -0.0016539291 0.0005265841 0.0021127802 0.0013217501 0.0016302642 -0.0050080509 -0.0085183939 -0.0004060344 0.0113843877 -0.0012977775 -0.0019203751 0.0010068159 0.0028561735 -0.0002386584 -0.0037838577 -0.0112022182 -0.0010985489 0.0163194405 -0.0034430016 0.0016580002 0.0061552780 0.0013509391 -0.0065132632 -0.0031083379 -0.0160338688 0.0232169378 0.0104715929 -0.0060242985 0.0400057969 0.0481111966 -0.0524360909 -0.0162561747 -0.0646633270 0.0143213029 0.0055668456 -0.0020676543 -0.0430284015 0.0014449456 0.0068269432 0.0226323095 0.0168912704 -0.0129577416 0.0176401266 0.0280067803 -0.0205241379 -0.0317826673 0.0285730724 -0.0715805141 -0.0048747153 0.0173208486 -0.0034512020 0.0045191405 0.0147229815 0.0157905445 -0.0033435088 0.0241705693 -0.0732822972 0.1144940926 -0.0202359918 0.1144181727 0.1021270942 -0.0003299914 -0.1070743811 -0.0139599057 0.0052502194 0.0719724457 0.0028904703 -0.0285158725 -0.0150412493 -0.0325711895 -0.0205766174 0.0595440935 -0.0054470955 -0.0306129202 0.0180316797 0.0393596657 0.0277583821 0.0427830723 0.0318683150 -0.0479283879 -0.0340234094 -0.0400852931 0.0074112642 -0.0078539750 -0.0068316937 0.0291606205 0.0147844137 -0.0112225604 -0.0257159423 -0.0123627831 -0.0041862171 0.0233911363 -0.0169680932 0.0428380529 -0.0386018660 0.0242692520 -0.0076375105 0.0049003049 -0.0054946743 0.0089279105 -0.0078998733 0.0063989429 -0.0028317347 0.0019402883 -0.0013076396 -0.0030219662 0.0019508723 -0.0024506720 -0.0055238577 0.0022174750 -0.0016285623 -0.0003790156 0.0008914526 -0.0008963254 0.0386470239 -0.0352226420 0.0230269587 0.0496348560 -0.0415782709 0.0273401495 0.0174225323 -0.0181054303 0.0106885796 0.0016530168 0.0010265249 0.0004186331 0.0002443697 0.0030472787 -0.0014514526 0.0032368187 -0.0034850259 0.0018388875 -0.0016306082 0.0045412822 0.0003973313 0.0006455708 -0.0025291691 -0.0029359663 0.0012948736 -0.0011827083 0.0021969097 0.0041661643 -0.0035335567 0.0009531334 0.0003662214 0.0023668280 -0.0014404168 -0.0049566431 0.0016707971 0.0015012873 0.0117808641 -0.0137959349 0.0029897921 -0.0045082221 0.0017217015 -0.0035942502 -0.0045062515 0.0064895487 0.0019686010 0.0011468079 -0.0043419296 0.0048114892 0.0064407676 -0.0061008531 -0.0022470408 -0.0002710275 0.0057786268 0.0030744418 0.0721448147 -0.0648286016 0.0034066252 -0.0342233209 -0.0250089871 0.0123978897 -0.0036114787 0.0059349525 -0.0025825908 0.0060423576 -0.0114143523 0.0108201001 -0.0006301715 0.0038668358 -0.0040007946 -0.0047909212 0.0004123270 -0.0017037455 -0.0003866890 -0.0030995573 0.0027152552 0.0090936414 -0.0007637807 0.0008279775 0.0011317474 0.0002047990 -0.0013741340 -0.0009509420 0.0022420457 -0.0022785569 0.0004947596 0.0001674499 -0.0006810080 0.0035671218 -0.0015520657 0.0069498756 0.0040721422 -0.0038226207 0.0131640834 0.0021524897 0.0080979960 -0.0084475090 0.0166911480 -0.0009995816 0.0133279818 -0.0026998305 0.0037611913 0.0024433167 0.0064342001 -0.0001579450 0.0073179049 -0.0022658510 0.0001653553 0.0016106173 0.0014780371 -0.0028945967 -0.0020106618 0.0027523431 -0.0035968905 -0.0036340562 -0.0003267621 0.0001281923 0.0010422052 0.0025678699 -0.0009821069 -0.0020687132 0.0011476153 -0.0005782522 0.0005708977 -0.0297323063 0.0123486775 -0.0024030040 0.0158686571 -0.0370457929 -0.0142488852 0.0017143999 -0.0172841497 -0.0314390461 0.0435566923 -0.0318745968 0.0114386818 -0.0088440054 -0.0019277622 0.0327334542 0.0021811753 -0.0164354092 0.0478633514 -0.0123368404 0.1085367078 -0.0736165169 -0.0834938590 0.1325811964 -0.0935618059 -0.0157812708 0.1124636294 -0.0145347894 -0.1440181184 0.1761862042 -0.0918901553 -0.0656122726 0.1485664325 -0.0558037485 0.0251254821 0.0270627231 -0.0011220273 0.0072031839 0.0070595186 0.0154610831 0.0419212233 0.0360574270 -0.0166876346 -0.0085222446 0.0031793652 -0.0164426883 0.0117218640 0.0242690980 -0.0346294903 -0.0425737648 -0.0918703740 0.0443387553 -0.1177216520 -0.1495236908 0.0899174746 -0.0518819900 -0.0983300067 0.0241024306 -0.1512055238 -0.1422370496 0.0757787141 -0.0709742657 -0.0886187279 0.0280419517 -0.0075856613 -0.0380023687 -0.0061423104 0.0021984646 -0.0310861553 0.0253889844 0.0107036428 0.0340368233 -0.0024661998 0.0131885926 0.0284163771 -0.0180168386 0.0428562858 0.0004769309 0.0778031685 -0.0716028371 0.0186459195 -0.1093687943 0.0017753166 0.0194790272 -0.0222814191 0.0643910113 -0.0195847048 0.0616391596 -0.1845851192 0.0573597330 -0.3204638782 -0.0507157777 0.0116509619 -0.1551439391 0.0106402248 -0.0228479504 0.0792235124 -0.0515122906 -0.0058717404 -0.0243685165 0.0252310845 -0.0269163850 0.0910355575 -0.1740315504 0.0563630360 -0.1973277856 -0.0709197414 0.0078897117 0.1050031076 0.0349375144 -0.0205094028 -0.0709522251 0.0170899326 0.0267940861 -0.0796367758 -0.0422057407 0.0214383385 0.0223335091 0.0163695272 0.0289194643 -0.0682424301 -0.1850024346 -0.0057355582 0.2039690645 -0.0086663254 -0.0311637205 0.0160328877 0.0636047839 0.0002511862 -0.0588479296 -0.1970949184 -0.0156711212 0.3010837788 -0.0593906806 0.0138256427 0.1570286040 0.0001358230 0.0013499600 0.0007775930 0.0027038354 -0.0019570249 0.0006329352 -0.0000560953 -0.0052425190 -0.0057640459 0.0065075825 0.0022818019 0.0083084535 -0.0010702595 -0.0010922995 -0.0003327627 0.0063433683 0.0010128000 0.0000010110 -0.0048564296 -0.0021787507 0.0025412285 -0.0027815673 -0.0044564182 0.0004232693 -0.0656192577 0.0504413835 -0.0535851638 0.0324315883 0.1755194016 -0.0903981853 0.0479433614 0.1638061258 0.0238657902 -0.0458178614 -0.1622637878 -0.0445050438 0.0265157090 -0.0872208977 0.1128489815 -0.0375264723 -0.0790804986 0.1014071183 -0.0037162413 -0.1708834662 -0.0425666097 0.0022665790 0.1603203525 0.0271590377 0.0713647815 0.0270474784 -0.0510947230 0.0106869233 0.1712692946 -0.0712513967 -0.0406528805 -0.0284349920 -0.0829079879 0.0395091165 -0.0548041763 -0.0818206003 -0.0039122188 -0.0025756916 0.0311130632 -0.0192009972 0.0227367300 -0.0048611673 0.0234691620 0.0107549319 -0.0064673038 0.0020123150 0.0012732783 -0.0025151549 -0.0712785135 0.0592472319 -0.0366519738 0.0076136840 -0.0050083482 0.0072248853 -0.0041047655 0.0038210986 -0.0038472663 0.0077421008 -0.0051081713 0.0000706060 0.0085695468 -0.0081112927 0.0070921777 0.0082686778 -0.0056338823 0.0034436340 -0.0096374507 0.0091678202 -0.0073228848 -0.0349093541 0.0285858612 -0.0263364314 -0.0877808941 0.0717689702 -0.0480376211 -0.0506838133 0.0385248861 -0.0292508426 -0.0009966375 -0.0002301030 0.0017211694 -0.0020293036 -0.0047907744 0.0031406409 -0.0017572266 -0.0081500926 0.0082857909 -0.0034087284 0.0051191217 -0.0017866381 0.0004130640 -0.0012393399 0.0006016157 0.0037221673 -0.0020576741 -0.0001788893 0.0014958230 -0.0032698031 0.0010362957 -0.0013796594 0.0021432193 -0.0000826557 -0.0012987591 0.0034197544 -0.0023627301 0.0121647720 -0.0136265065 0.0028676652 0.0007852393 -0.0087839649 -0.0024149753 -0.0008533310 0.0008805765 0.0011331827 0.0042012065 -0.0056862854 -0.0015719563 0.0056014406 -0.0120466641 0.0030829016 0.0023721346 -0.0062597309 0.0024831842 -0.0602891106 0.0553888585 0.0006590077 -0.0000511526 0.0623193881 -0.0274733993 0.0005680646 -0.0005112794 0.0001367190 -0.0014776281 0.0041101655 -0.0019732679 -0.0033557515 -0.0022179598 0.0024327280 0.0118430241 0.0003190305 -0.0090415480 0.0048078288 0.0015105948 0.0065767353 -0.0069685448 0.0035216989 -0.0048694527 -0.0170119886 -0.0107908381 0.0130345605 0.0018208971 0.0007534538 0.0007089759 -0.0001656270 -0.0001728450 0.0003103872 -0.0057071722 -0.0052014935 -0.0020457916 -0.0058085536 0.0028478400 -0.0179744209 -0.0023732674 -0.0280079055 0.0390218831 -0.0159081091 -0.0064797418 -0.0055400366 -0.0281530840 -0.0104472005 -0.0102637195 0.0123714129 -0.0028200148 0.0034897604 0.0489891782 -0.0112870221 -0.0464811196 -0.0222607532 0.0486185395 0.0236655951 -0.0422365901 0.0550117040 0.0504851561 -0.0003040773 -0.0002565479 0.0006199399 -0.0012514493 0.0011951829 0.0009721208 0.0012921466 -0.0021336428 -0.0020176165 0.0167162439 0.0498232149 -0.0279780166 0.0336325384 0.0150965949 0.0642011084 0.0278544462 0.0417784012 0.0423211464 -0.0373929731 -0.0598812513 0.0352467417 0.0036722123 -0.0374074853 -0.0583187286 0.0095919249 -0.0542836674 -0.0282211216 -0.0388462410 0.0810476809 0.0148242090 0.0475136606 0.1695277605 -0.0894437115 -0.0540604085 0.0894698260 -0.0046465756 -0.0123429421 0.1818618492 -0.1446847261 -0.0961330470 0.0495666137 -0.0421776467 -0.0255294964 0.0169333546 0.0723287001 -0.0152162393 0.0458884499 0.0540287937 0.0241852069 -0.0734172544 0.0295430959 -0.0113210450 -0.0214963410 -0.0661805813 -0.0236125220 -0.0435423468 -0.0371957530 0.0536982867 0.0452833926 0.0325292990 -0.0102843402 0.1910220616 -0.0729573186 0.0703104117 0.0589548736 -0.0130359999 0.0233463813 0.1611413372 -0.1070975975 0.0701617749 -0.0114618948 -0.0213673836 0.0365026602 -0.0165373449 0.0319503178 0.0229877429 -0.0279320679 -0.0326352584 -0.0353288698 -0.0003704683 0.0357083459 -0.0331441407 -0.0186056299 -0.0307547793 0.0598285370 0.0613916487 0.0829093127 -0.0641518711 -0.0363608851 -0.0712213220 -0.0191348872 0.1032872228 -0.0359226194 0.0432944693 -0.0151274772 0.0190327184 -0.1036725884 0.1258043133 -0.0327985496 0.0657582291 -0.0675291209 0.1368579869 -0.0438892045 -0.0775787889 0.0569341217 -0.0593285635 -0.0066565289 -0.0396105648 0.0493026047 -0.0960041839 0.2395821801 -0.0241164570 0.0940221877 0.0954422929 0.0387272890 -0.0515799092 -0.0583172459 -0.0301559298 0.0707738245 0.0712228955 0.0156912936 -0.0820185376 0.0452948017 0.0449747827 -0.0199562588 -0.0375606994 -0.0686985572 -0.0755030327 0.2151827388 0.0295736586 0.0736221106 0.1099506585 0.0501112731 0.0870186020 -0.0307100773 -0.0343506606 -0.0006889581 0.0128258735 0.1095772726 0.0838404918 0.0108334892 -0.0844501249 -0.0462933711 0.1541919619 0.0002136451 0.0000434504 -0.0002871678 0.0006211136 0.0005765816 0.0019897056 -0.0014866533 -0.0010991269 -0.0005921801 -0.0008442918 -0.0008901840 -0.0005863498 0.0000995546 0.0008893056 0.0002055717 0.0012482260 0.0002639770 -0.0004717518 0.0042961711 0.0005590042 -0.0019840490 -0.0014432392 0.0005982533 -0.0005298809 0.0020265081 -0.0080101993 -0.0085710248 -0.0838049882 0.0058520594 -0.1922479572 0.0033593084 -0.0188230092 0.0042201922 -0.0107973814 0.0117819788 -0.0147326110 -0.0095027307 0.0053420787 -0.0145151406 0.0077187706 0.0069935308 -0.0168225191 -0.0033801535 0.0110844793 -0.0016192135 -0.0066981597 -0.0112046696 -0.0024737847 -0.0081864491 -0.0051100363 0.0005484954 0.0051777893 -0.0096430220 -0.0447710577 0.0033345900 0.0017983906 0.0181207795 -0.0025368718 0.0084693720 0.0119311095 0.0015029695 0.0017129692 -0.0065889389 0.0032608007 -0.0038096420 0.0001590599 -0.0033401489 -0.0014464348 0.0010053496 -0.0003204263 -0.0022946747 0.0026179030 0.0182641966 -0.0143373061 0.0096027971 -0.0015730051 0.0013886162 -0.0011573801 0.0010489399 -0.0005020516 0.0003602227 -0.0020466780 0.0015005836 -0.0001814281 -0.0028174903 0.0021618691 -0.0018285746 -0.0010279023 0.0010700804 -0.0009941090 0.0030293078 -0.0026906973 0.0022050200 0.0074510700 -0.0062045654 0.0056687083 0.0214728649 -0.0179367391 0.0122962061 0.0142137146 -0.0099587757 0.0075625750 -0.0001725274 0.0004157077 -0.0005307822 -0.0000117760 0.0010854206 -0.0010741169 -0.0004559124 0.0029124324 -0.0031538367 0.0007757383 -0.0013412115 0.0005725159 -0.0003369587 0.0006719918 -0.0005078011 -0.0010051955 0.0000613699 0.0001047456 -0.0001469389 0.0009460325 -0.0000568550 0.0005851114 0.0002311254 0.0002510405 -0.0002560475 -0.0003329340 0.0003237468 -0.0009498626 -0.0000425160 0.0000661558 0.0003693562 0.0014633553 0.0005771670 0.0023540763 -0.0023754846 0.0009679016 0.0019686800 -0.0024304524 0.0016521385 0.0009828632 -0.0016072618 0.0000594730 -0.0009515449 0.0005429206 -0.0005143276 0.0053072327 -0.0044523402 -0.0008293384 -0.0005258597 -0.0085695747 0.0041433411 -0.0006564512 0.0012977767 -0.0007247903 0.0025199141 -0.0045350909 0.0030547549 0.0015087863 0.0016936184 -0.0029216365 -0.0066205079 -0.0000565807 0.0051523039 -0.0054665326 -0.0025460662 -0.0053419595 0.0037036410 -0.0035204375 0.0054677028 0.0111824454 0.0068857106 -0.0068078560 -0.0008808183 0.0005193497 -0.0005869985 0.0001680673 0.0001353418 -0.0001870514 0.0067707298 0.0086241452 0.0030882155 0.0075410810 -0.0040390281 0.0195505876 0.0011359725 0.0227852729 -0.0338001715 0.0067641343 0.0075479837 -0.0027428015 0.0278560116 0.0075658706 0.0096528067 -0.0120841549 0.0017401917 -0.0079677674 -0.0335715757 0.0083535132 0.0290210885 0.0168980203 -0.0319682749 -0.0194251754 0.0215463580 -0.0324409948 -0.0293507616 -0.0005459720 0.0000499028 0.0004696907 0.0004427871 -0.0008585165 -0.0003955630 -0.0001802357 0.0005966268 0.0005167667 -0.0049384269 0.0044864169 -0.0011896197 0.0043737719 -0.0042716618 0.0010065591 0.0030316612 -0.0006118463 -0.0043624988 0.0060515963 -0.0051974106 0.0011703140 -0.0034199480 -0.0004443328 0.0046985736 -0.0003882164 -0.0020651049 0.0087711741 -0.0004801491 0.0121312020 -0.0062830718 -0.0049341553 0.0195797424 -0.0157458560 -0.0017065790 0.0154659870 -0.0018385992 -0.0244191444 0.0219223941 -0.0127894653 -0.0093618507 0.0169104208 -0.0020382956 0.0031157962 -0.0006067321 -0.0082460108 0.0009006608 -0.0050253139 -0.0068122168 -0.0022356790 0.0104558162 -0.0048142446 0.0023069977 0.0020546913 0.0090476216 0.0038670444 0.0060421474 0.0061552884 -0.0079800409 -0.0045277267 -0.0026071619 -0.0036954820 -0.0263169488 0.0097387222 -0.0101593932 -0.0092562747 0.0022006751 -0.0019126083 -0.0242785822 0.0145096284 -0.0062977093 0.0027615714 0.0042810879 -0.0014123428 -0.0051908902 -0.0007972452 0.0005641763 -0.0039675764 0.0040012880 0.0050107162 0.0005011409 -0.0045271688 0.0044001506 0.0030900606 0.0040070325 0.0376295401 -0.0138977945 0.0696831816 0.0196008949 -0.0002404500 0.0286065924 -0.0391462651 -0.0005199438 -0.0656723052 -0.0261160633 0.0088949952 -0.0348604749 0.1678514935 -0.0424267929 0.2896793050 0.2835553236 -0.0394435146 0.4949314368 -0.0180046362 0.0098428992 -0.0404695780 -0.0307907923 0.0069314558 -0.0570179121 0.2039694153 -0.0247099798 0.2890763568 0.2661110859 -0.0449668752 0.4330150515 -0.0140922240 0.0022255470 0.0232656109 -0.0036692960 -0.0000073560 0.0070247507 0.0116130564 -0.0022237540 -0.0187784161 0.0056216088 -0.0011830278 -0.0089673273 -0.0404359042 0.0044437024 0.0596571884 -0.0844501953 0.0113235430 0.1450327365 0.0105181929 0.0003869570 -0.0142500985 0.0138328348 -0.0004235601 -0.0189067589 -0.0649255926 0.0066418997 0.1230386857 -0.0812072470 0.0088945746 0.1501200445 0.0001198314 0.0002032023 0.0002713616 0.0002682308 -0.0002355304 -0.0002862519 0.0004631329 -0.0002437995 -0.0003364290 0.0012280125 0.0005997205 0.0012626817 -0.0004078261 -0.0002948862 -0.0001184772 0.0009185080 0.0000710037 -0.0000072742 -0.0011260101 -0.0008187705 0.0005338861 -0.0013478573 -0.0018225433 0.0006129895 0.0033287681 -0.0040003653 -0.0004655889 -0.0118977142 -0.0099700011 -0.0207926080 -0.0016677275 -0.0124983841 -0.0007558044 0.0004650001 0.0103950702 -0.0003369157 -0.0008867207 0.0046835559 -0.0045046085 0.0058672294 0.0047328168 -0.0108865412 0.0003888125 0.0105552254 0.0026789475 -0.0017966964 -0.0117008119 -0.0020874678 -0.0067049817 -0.0030031586 0.0048672281 0.0023284434 -0.0118800752 -0.0095183532 0.0036859213 0.0021395865 0.0086570577 -0.0033313289 0.0050644896 0.0039535732 0.0000037479 -0.0003657102 -0.0029244627 0.0019210292 -0.0008960098 0.0016910562 -0.0006350690 -0.0019929426 0.0004232115 0.0024997903 -0.0180043722 0.0078749293 -0.0695712508 0.0653621173 -0.0408973970 0.0069510583 -0.0043462850 0.0065405323 -0.0004460837 0.0030051964 -0.0023553259 0.0048492696 -0.0047272881 0.0082769639 0.0119984675 -0.0084156580 0.0075786709 0.0097875136 -0.0010884260 0.0001503473 -0.0144159804 0.0110154455 -0.0057627983 -0.0329098330 0.0308883110 -0.0130886623 -0.0904089319 0.0762115356 -0.0460890944 -0.0508094782 0.0466663118 -0.0328523730 0.0009764507 -0.0006512355 -0.0052842468 0.0016694888 -0.0093830911 0.0036094883 0.0032763966 -0.0179601624 0.0139483826 0.0033470259 -0.0049659143 0.0010126124 -0.0023356804 0.0019508626 -0.0012979657 -0.0005687187 0.0026555200 -0.0000666943 -0.0027646995 0.0047558888 -0.0007476550 0.0016816412 -0.0008102801 0.0009387469 0.0001428967 -0.0016216319 0.0006036276 0.0010980698 0.0007795487 0.0001083414 0.0057742537 -0.0097755624 0.0005928806 0.0084267527 -0.0113936922 0.0053803727 0.0046744541 -0.0081654270 0.0018092756 0.0021815635 -0.0053104840 0.0004474621 0.0015934414 -0.0065021880 0.0016411333 -0.0384620242 0.0205857691 0.0034719734 0.0012817342 -0.0019987421 0.0007161188 0.0092988909 -0.0175236329 0.0094802154 -0.0313920138 0.0534521934 -0.0394704911 -0.0122512977 -0.0192515662 0.0327449315 0.0569007191 0.0015015912 -0.0485460296 0.0577261090 0.0289486397 0.0566724347 -0.0280682360 0.0334872129 -0.0566722662 -0.1061702246 -0.0642397702 0.0573631816 0.0087595519 -0.0080014639 0.0067740658 -0.0015247350 -0.0012810655 0.0025351599 -0.0709895452 -0.1027621186 -0.0250286359 -0.0819681520 0.0450072839 -0.2111332065 -0.0081687625 -0.2323040555 0.3448775574 -0.0373363881 -0.0731963450 0.0501880300 -0.2815103170 -0.0682013900 -0.0950269655 0.1120501703 -0.0135728954 0.0879243576 0.3231989501 -0.0825937163 -0.2692346951 -0.1697197068 0.3038207854 0.2000467697 -0.1791350536 0.2928712595 0.2627705382 0.0072567442 -0.0003436535 -0.0069192963 -0.0051764124 0.0092284263 0.0052040786 0.0003532751 -0.0036336578 -0.0037646904 -0.0019349661 -0.0010678127 0.0008713570 -0.0002079653 -0.0020449357 -0.0031512589 -0.0004372612 -0.0028293706 -0.0028477826 0.0031342336 0.0019330761 -0.0015427031 -0.0010551408 0.0020785969 0.0040212941 -0.0005650650 0.0024501058 0.0033796577 0.0017069939 0.0006211602 -0.0033210788 -0.0054683889 -0.0016414803 0.0001628912 0.0015343981 -0.0011978386 -0.0001682655 -0.0042505189 -0.0052902271 0.0052666787 0.0034392948 -0.0001513706 0.0027421472 0.0012514580 -0.0011308809 -0.0041010341 0.0002906224 -0.0035444658 -0.0028698786 -0.0017486065 0.0042877903 -0.0017637751 0.0012153846 0.0017462601 0.0037943974 0.0016677753 0.0025442126 0.0021926848 -0.0045385214 -0.0046617797 -0.0010344167 0.0025843626 -0.0089110789 0.0032943870 -0.0045945759 -0.0036237287 0.0015608484 -0.0024636313 -0.0114912188 0.0073696814 -0.0076274836 -0.0044963533 0.0041504579 -0.0018294303 -0.0002091034 -0.0012197176 -0.0009981647 0.0003534323 0.0020506094 0.0024941805 0.0002218967 -0.0025109236 0.0019908232 0.0011212114 0.0017212721 0.0027202409 -0.0051632854 0.0064890729 0.0038363918 0.0026730933 0.0040764415 -0.0040551083 -0.0051058894 -0.0066372422 -0.0042725418 0.0015522284 -0.0033581862 0.0210389650 -0.0104571340 0.0287688064 0.0295300820 -0.0012522975 0.0504722160 0.0010280100 0.0053255775 -0.0065093108 -0.0015492968 0.0010675612 -0.0060757729 0.0251521146 0.0017400047 0.0259861549 0.0310731623 -0.0104216730 0.0436101025 -0.0059818507 0.0036940781 0.0096896525 0.0010063089 -0.0039922027 -0.0030078306 0.0015775515 0.0050509688 -0.0075317572 -0.0016826419 0.0011083151 0.0001751347 -0.0060160378 0.0063036914 0.0005557692 -0.0230109396 -0.0020792692 0.0284547948 -0.0004753647 -0.0053123136 -0.0016333820 0.0057167756 -0.0002139640 -0.0056238291 -0.0233379931 -0.0035214024 0.0314367111 -0.0150076065 0.0048041780 0.0281192476 -0.0017856166 -0.0033263101 -0.0032750194 -0.0055037077 0.0038857808 0.0020479989 -0.0043888838 0.0077618316 0.0092944338 -0.0176866833 -0.0073159545 -0.0199821502 0.0047577729 0.0041413195 0.0008359973 -0.0162794745 0.0009319703 0.0016732988 0.0113624683 0.0070839087 -0.0037496979 0.0145816169 0.0202041172 -0.0089359926 0.0073684125 -0.0046294620 0.0074127678 0.0433208811 -0.0155415243 0.0687982340 0.0011675865 -0.0038533536 -0.0066823167 0.0144074513 0.0019533086 0.0103930027 -0.0051290103 0.0082816294 -0.0144337504 0.0067544190 -0.0033037150 -0.0067104551 0.0199101373 0.0011062163 -0.0185625600 -0.0086556419 -0.0134941128 0.0078720848 -0.0013630725 -0.0051408771 -0.0099755168 0.0927362741 -0.0078839279 -0.2097604604 0.0013587630 0.0063502363 0.0046509145 -0.0040163783 0.0018980152 0.0138551998 -0.0002986632 0.0006056068 -0.0037577482 0.0017906635 -0.0020577325 0.0003870106 -0.0023544857 -0.0010820818 0.0000615143 0.0000842666 -0.0085371155 0.0060836807 0.0286432345 -0.0219191405 0.0149922661 -0.0029073063 0.0026365459 -0.0017976580 0.0022765157 -0.0010363734 0.0003948451 -0.0031327264 0.0022526736 0.0004534517 -0.0041351961 0.0033134913 -0.0026839459 -0.0015152093 0.0030771082 -0.0026597304 0.0043548286 -0.0038462929 0.0035029580 0.0114018067 -0.0095971905 0.0094048431 0.0350048072 -0.0291291301 0.0210761625 0.0227181985 -0.0131970724 0.0110895725 -0.0003699508 0.0005493407 -0.0021925569 0.0001572292 -0.0000150238 -0.0007889724 -0.0003368042 0.0014551426 -0.0021137051 0.0010711413 -0.0012227159 0.0008873875 -0.0006370417 0.0006766360 -0.0010639088 -0.0014949542 0.0008550014 0.0002701409 0.0002547931 0.0013864119 -0.0000363453 0.0008137948 0.0003750569 0.0003241125 -0.0007532684 -0.0006145101 0.0008361004 -0.0003420079 -0.0003235723 -0.0000581167 0.0014319736 -0.0002004926 0.0002720076 0.0030558569 -0.0036035108 0.0025017640 0.0027420403 -0.0040863993 0.0028332481 0.0022263006 -0.0029344162 -0.0001608922 -0.0014686768 -0.0002199439 -0.0004966659 -0.0082648305 0.0072374907 -0.0014759828 0.0134775300 0.0176453397 -0.0081269320 0.0002594432 -0.0002219166 -0.0000006587 0.0001255415 -0.0001230624 -0.0001743667 0.0000695112 -0.0000094769 -0.0003480516 0.0005418631 -0.0002956697 0.0010225599 -0.0012268101 -0.0003866294 -0.0018536223 -0.0019327331 -0.0000014562 0.0010711010 0.0015410870 0.0010160765 0.0001365962 -0.0000689494 0.0000190940 0.0000735207 -0.0000722637 0.0000166185 0.0000828537 0.0007811376 0.0039720931 -0.0018024965 0.0011405551 -0.0006696863 0.0036842683 -0.0005765250 0.0035432687 -0.0055230169 -0.0056842378 0.0007993466 -0.0054148279 0.0055216856 -0.0007836971 0.0008465416 -0.0010481221 -0.0001807326 -0.0030514425 -0.0057917056 0.0018165652 0.0038522301 0.0035115527 -0.0047199306 -0.0045443098 -0.0002092837 -0.0028119437 -0.0021294597 -0.0001730989 0.0000044610 0.0001256115 -0.0002294105 -0.0000756081 0.0001726432 -0.0000816580 0.0000113267 -0.0000191210 0.0033793286 -0.0144186255 0.0074499749 -0.0082519174 0.0041190769 -0.0093918127 -0.0044208062 -0.0061364937 -0.0022445669 -0.0009420137 0.0170067562 -0.0090900733 0.0008855990 0.0048149303 0.0064286178 -0.0026168020 0.0120363535 -0.0014150570 0.0058705323 -0.0171575058 0.0031081728 0.0041557606 -0.0475844416 0.0277483044 0.0112372191 -0.0301569949 0.0030450596 0.0201850158 -0.0540070115 0.0362722323 0.0176264064 -0.0160690354 0.0090670678 -0.0102033475 -0.0056305373 0.0090783649 -0.0034222357 0.0051367854 -0.0000577992 -0.0111855801 -0.0189816493 0.0080800788 0.0035171221 -0.0012347211 -0.0022542821 -0.0051090621 -0.0101280256 0.0073597519 0.0058167718 0.0131212734 -0.0005688525 0.0252792521 0.0566345632 -0.0310634378 0.0190818958 0.0308581394 -0.0075160051 0.0421302809 0.0470292747 -0.0283644425 0.0132160527 0.0070699772 0.0007302369 -0.0052938625 0.0078143544 -0.0042105117 -0.0036604248 0.0089865149 0.0020125879 -0.0056203422 -0.0089303756 0.0033983254 -0.0060001346 -0.0088631928 0.0025341017 -0.0193840990 0.0073880298 -0.0356566736 0.0062528436 -0.0031599033 0.0111682939 0.0121106045 0.0045303825 0.0255837941 -0.0009770301 -0.0009570225 -0.0004431687 -0.0288000484 0.0131251804 -0.0368844358 -0.0829520480 0.0063847891 -0.1320591243 -0.0034511499 -0.0041828945 -0.0005871938 0.0147179190 -0.0038723420 0.0243363493 -0.0806752980 0.0080959538 -0.1091274310 -0.0598755601 0.0096038663 -0.0982367975 -0.0134915343 0.0058826056 0.0216515079 -0.0427015853 -0.0029443222 0.0750931889 0.0144650931 0.0074868346 -0.0320303661 0.0329875024 -0.0017684592 -0.0594046498 -0.2021323121 0.0359913578 0.2827745487 -0.2563947481 0.0304336594 0.4239744459 0.0374508371 -0.0129242510 -0.0712278750 0.0252711823 0.0009788018 -0.0333181445 -0.1743855563 0.0043926859 0.2933640497 -0.2843328307 0.0428187670 0.5055779873 -0.0000104751 -0.0000547991 -0.0001009122 -0.0000841607 0.0002039785 0.0002271465 -0.0001197195 0.0002403633 0.0002629662 -0.0005847143 -0.0003349902 -0.0005942522 -0.0000360003 0.0000788312 0.0000710857 0.0002818930 0.0000828061 0.0000745789 0.0001518899 -0.0000233656 -0.0000098877 -0.0006803380 -0.0006265098 0.0003185352 0.0016540331 -0.0029030760 -0.0014773405 0.0003784848 -0.0098290329 0.0044891595 -0.0011914190 -0.0091085425 -0.0011119667 0.0002217935 0.0057671664 0.0023810805 -0.0012588237 0.0025337007 -0.0001323984 0.0027346740 0.0037160636 -0.0061953662 0.0007138341 0.0064574925 -0.0011261639 -0.0002076919 -0.0046632743 -0.0003351220 -0.0025487144 -0.0004512393 0.0015084960 0.0072264732 -0.0046097151 -0.0130929043 -0.0011133407 0.0000315812 0.0073984373 -0.0034196355 0.0047089761 0.0009673924 0.0013409409 0.0011693419 -0.0018805183 0.0028320938 -0.0014852538 -0.0000862855 -0.0053237599 -0.0000549233 -0.0000311472 -0.0020042567 0.1456892797 -0.1048257320 -0.3534595102 0.2584259991 -0.1851810364 0.0358128137 -0.0370589441 0.0172210076 -0.0394770234 0.0155614729 -0.0051621930 0.0394742881 -0.0273414454 -0.0118214334 0.0502538573 -0.0412290630 0.0296645139 0.0056389376 -0.0402440809 0.0369786127 -0.0463571042 0.0428845540 -0.0431992186 -0.1413562091 0.1173070312 -0.1244510786 -0.4216714582 0.3496101526 -0.2656496818 -0.2792715234 0.1455837602 -0.1259646120 0.0111162468 -0.0089520596 0.0361618002 0.0064542776 0.0061499502 0.0147314217 0.0174630822 -0.0181260135 0.0305574658 -0.0267179275 0.0345682070 -0.0175897773 0.0184866656 -0.0208025958 0.0218784541 0.0240226985 -0.0157232915 -0.0042648615 -0.0025596572 -0.0290329045 0.0004524100 -0.0174995945 -0.0112040580 -0.0085433167 0.0173229625 0.0064359383 -0.0114654722 -0.0169047484 0.0336634953 -0.0056523920 -0.0215253219 0.0087762515 0.0029870830 -0.0837953243 0.1007750410 -0.0628242527 -0.0887318285 0.1296900337 -0.0604393821 -0.0690908475 0.1078754743 -0.0092950783 0.0217724900 0.0181292751 0.0066132854 0.2188629324 -0.1931905020 0.0240886472 -0.0009929937 -0.0039103455 0.0018563794 -0.0068476094 0.0076217255 -0.0027179882 0.0098225780 -0.0156892528 0.0153079359 0.0018165289 0.0065135796 -0.0059681028 -0.0086271326 -0.0009625439 0.0028750715 -0.0065016955 -0.0022562964 -0.0027236972 0.0073753031 -0.0060989305 0.0075958535 0.0105216211 0.0077992565 -0.0075397915 -0.0022289607 0.0027414995 -0.0023314653 0.0012405536 -0.0002168660 -0.0023402791 0.0086208208 0.0020934014 0.0122614700 0.0089715758 -0.0037560351 0.0158419664 0.0022050006 0.0192882769 -0.0333929651 0.0173699414 0.0143477592 -0.0007977172 0.0384959726 0.0130599592 0.0144952289 -0.0205815329 0.0031705294 -0.0112258714 -0.0351440122 0.0085840374 0.0320538202 0.0143370976 -0.0317855976 -0.0157438926 0.0253256140 -0.0351812970 -0.0320060312 -0.0008963466 -0.0001724886 0.0013595150 0.0033901350 -0.0016560551 -0.0035818402 0.0011687640 -0.0002288678 0.0005694416 -0.0002097704 -0.0004997328 0.0004587943 0.0011770989 0.0003510458 -0.0021987650 0.0020914898 -0.0026691344 0.0002972145 0.0011075456 0.0014020430 -0.0011083361 -0.0006208501 0.0004380346 0.0016353119 -0.0007539681 0.0011618841 0.0008898454 0.0005797879 0.0033989187 -0.0036900033 -0.0058159667 0.0054681399 -0.0009149275 -0.0014305032 0.0005479586 -0.0000494431 -0.0004806563 -0.0035813449 0.0031861801 0.0002890999 -0.0004678743 0.0017348085 0.0011744916 -0.0005677409 -0.0031271121 0.0004697262 -0.0022244796 -0.0023622819 -0.0007455020 0.0037665115 -0.0016724774 0.0006094356 0.0007806624 0.0031507259 0.0014045545 0.0023517871 0.0017496920 -0.0004539366 0.0004829513 -0.0025237942 0.0001416711 -0.0086408005 0.0031604690 -0.0033140609 -0.0029362818 0.0006105133 -0.0010287256 -0.0089406866 0.0052335453 -0.0021713300 0.0021807593 0.0001655846 -0.0002351713 0.0000632150 0.0009522069 -0.0003645091 -0.0008635965 0.0000248028 0.0016377038 0.0000653567 -0.0015717297 0.0014953403 0.0009767365 0.0014252914 -0.0015986851 -0.0025270053 -0.0016916997 0.0012630293 0.0022707903 0.0011056891 0.0002826014 -0.0035815111 0.0010719698 -0.0012706150 0.0003485890 0.0005232531 0.0009063137 -0.0038819542 -0.0031965583 -0.0035315789 0.0018267998 -0.0052337975 0.0027355276 0.0035893277 -0.0021406423 0.0022184862 0.0000931208 0.0002063275 0.0021600567 0.0038030679 -0.0065108884 0.0013870480 -0.0049377644 -0.0049050698 -0.0037531331 0.0015511749 0.0058884715 -0.0019823505 -0.0023086529 0.0030723574 0.0017973178 0.0017940339 -0.0046800248 0.0013164139 0.0005454746 -0.0030842520 -0.0123835109 0.0037677169 0.0155938126 -0.0237942232 0.0015443419 0.0364853542 0.0018278407 -0.0033241727 -0.0048664857 0.0040611303 0.0003098424 -0.0044870567 -0.0210264081 -0.0014992896 0.0304791926 -0.0230839021 0.0053566970 0.0413503266 0.0008519963 0.0027109632 0.0022372527 0.0033966600 -0.0040587506 -0.0042237602 0.0038841893 -0.0044258514 -0.0068654543 0.0146765717 0.0081144729 0.0150216457 -0.0021959233 -0.0033218763 -0.0003727376 0.0000116601 0.0005529520 0.0024926272 -0.0106435731 -0.0000484801 0.0025131855 0.0079049480 0.0039255433 -0.0002656094 -0.0072640825 0.0018215772 -0.0114996512 -0.0026079948 0.0006792939 0.0090026071 -0.0015746524 0.0006661656 0.0015916999 -0.0033389233 -0.0010169033 0.0040294186 0.0023797099 -0.0021620561 0.0153369544 -0.0097143763 0.0053437818 0.0013900426 -0.0064521250 0.0034557031 -0.0058987538 0.0020634642 0.0098675738 0.0003969756 0.0033611593 0.0049796622 -0.0058973973 0.0035327525 0.0099781622 0.0006551268 -0.0051642115 -0.0083731900 0.0038322858 -0.0043123409 0.0065279047 -0.0147509295 0.0039890417 -0.0013386099 0.0020793000 -0.0003631761 -0.0023535218 -0.0013028629 0.0088726080 -0.0015876392 0.0014434292 0.0313879781 -0.0746835439 0.0951728670 0.0509289829 -0.0328072234 0.0369501723 0.0024115882 0.0059949584 0.0113041646 -0.0162185794 0.0122873997 -0.0158137893 0.0097016002 0.0063201393 -0.0259544499 -0.0381033960 -0.0048655076 -0.0149874774 -0.0151960759 -0.0111962228 -0.0041723393 0.0426265703 -0.0231275277 0.0085549110 -0.0361738986 0.0117029814 -0.0644717540 0.0928613201 -0.1119162796 0.0303856091 0.0955690295 -0.0872938595 0.0598815170 0.0108975522 0.0360564499 0.0087911490 0.0042530481 -0.0317048825 0.0248128138 0.0253208237 -0.0552269611 0.0056010989 -0.0895832836 0.1266509017 -0.0364194256 0.0499855843 -0.0700470908 0.0252309947 0.0415888538 -0.0540680261 0.0083634532 0.0322551102 -0.0545048095 0.0131902848 -0.0131709688 0.0057406023 -0.0041979396 0.0086359298 0.0055595507 -0.0074696445 -0.0157926046 0.0223563425 -0.0067695549 0.0028786939 -0.0053536903 0.0093843748 -0.2068885614 0.2911387451 -0.0846686072 -0.2380031502 0.3393940566 -0.0925550855 -0.1824850194 0.2597976228 -0.0536955195 0.0038925395 -0.0066039082 0.0025588450 -0.3318428551 0.2973279412 -0.0036084089 -0.0102953734 -0.0167397346 0.0085957278 0.0167755612 -0.0237361672 0.0072501885 -0.0048202071 0.0157867515 -0.0308685064 0.0001396064 -0.0180112790 0.0191005276 -0.0269439630 0.0048075889 -0.0280311874 0.0004770690 0.0315707552 0.0535306418 0.0526748768 -0.0315769171 0.0070102993 -0.0091636078 0.0163926277 -0.0259291582 0.0058607353 0.0016080195 0.0080124160 -0.0027190211 0.0011503300 0.0041773111 0.0076447499 -0.1617613209 0.1539485580 -0.0092114938 0.0395918037 -0.1887821932 0.0242394129 -0.1249635552 0.0906053843 0.1898710027 0.0743570381 0.0927549559 0.0485789880 0.0639846571 0.0395006428 -0.1193075529 0.0244695014 -0.0165473752 -0.0140750947 -0.0019671600 0.0563491875 -0.0547268478 0.0029761348 0.0830272577 0.1105043308 -0.0732054999 -0.0735399561 -0.0110530294 -0.0007859438 0.0057814932 -0.0160470869 0.0019643777 0.0119430856 0.0007277182 -0.0038335532 -0.0104980526 0.0075023630 -0.0111773471 0.0059379172 -0.0011978522 0.0046838228 0.0021648695 0.0024227707 0.0003451103 0.0043510693 -0.0092768099 0.0130896754 -0.0067187354 0.0015330602 -0.0034003476 -0.0008749154 -0.0005199540 0.0029531587 -0.0042428094 -0.0082320671 0.0158050616 -0.0039481211 0.0168013559 -0.0200060634 0.0104760567 0.0048221147 -0.0221609429 0.0046352437 0.0153588318 -0.0225469977 0.0122282593 -0.0076433046 0.0105276310 -0.0056699017 0.0050250012 0.0025464765 -0.0069741113 0.0006295928 -0.0042061934 -0.0032688604 0.0071931622 0.0176087740 -0.0084008558 -0.0011057054 -0.0018098906 0.0073250414 0.0035574139 0.0058714900 0.0021515773 0.0045289864 0.0069937343 -0.0073536528 -0.0172000625 -0.0381236674 0.0174141857 -0.0146351994 -0.0211722691 0.0058298641 -0.0102529597 -0.0238990353 0.0147953777 0.0126135645 0.0224096571 -0.0086676908 -0.0007608856 0.0077856108 0.0005433684 -0.0001337881 0.0066330107 -0.0035088813 0.0051670175 0.0052159159 -0.0031911932 0.0049039977 0.0059768551 0.0004107853 0.0034497547 -0.0036686208 0.0080171367 -0.0058069908 0.0011590666 -0.0102500611 -0.0013873997 -0.0034483993 -0.0020478233 0.0021915780 0.0008328156 0.0060805363 -0.0100414826 -0.0019875685 -0.0266503745 -0.0028309666 0.0019859544 -0.0033148655 0.0047797084 0.0013783197 0.0018612055 0.0003847044 0.0014078955 -0.0064720922 0.0153176839 -0.0002488253 0.0167766388 0.0019628895 -0.0027640344 -0.0067297421 0.0016691760 -0.0049368106 -0.0061125218 -0.0040159640 0.0014930300 0.0079119563 0.0027257105 -0.0091827077 0.0038998041 0.0048406500 -0.0008545462 -0.0034241734 -0.0035932228 -0.0086360897 0.0240874874 0.0004678932 0.0076463183 0.0147321215 0.0036701051 0.0036605301 -0.0024831297 -0.0005232821 0.0022416898 0.0020868159 0.0055527833 0.0036541725 -0.0042859215 -0.0066558903 0.0015059132 0.0145986217 0.0049276320 -0.0026391185 0.0020555787 -0.0065260581 0.0172232608 0.0098804681 0.0018563310 0.0284556249 0.0346106286 -0.0304822221 -0.0099830064 -0.0369584516 0.0037684789 0.0017738274 0.0030508097 -0.0412488119 -0.0091968010 0.0011555389 0.0147720944 0.0148564787 -0.0092665082 0.0037629919 0.0197638289 -0.0209614416 -0.0012655903 -0.0052959996 0.0120114553 0.0141916211 -0.0162521299 0.0449886518 -0.0040472815 -0.0107128094 0.0049740958 -0.0101015148 -0.0023364940 0.0093705172 -0.0116048342 -0.0087646822 -0.0007012755 -0.0382217587 0.0182782659 0.0297111211 -0.0219975178 0.0033926532 -0.0189123887 0.0103640535 0.0464675656 0.0023584262 0.0263393054 0.0198709427 -0.0444001646 0.0272638310 0.0470648850 -0.0115009314 -0.0152103461 -0.0221074028 -0.0089732534 0.0003267403 0.0044942215 -0.0061330457 0.0090030453 0.0025377229 0.0010755313 -0.0023852192 -0.0033358455 -0.0032400673 0.0040462526 0.0086357781 0.0043120929 -0.0149506244 0.0193569020 -0.0327180036 -0.0160276727 0.0115411508 -0.0137771678 -0.0016758108 -0.0014203825 -0.0054292796 0.0102721358 -0.0067206454 0.0078095988 -0.0063186963 -0.0023323647 0.0142115014 0.0177570599 0.0040994297 0.0069518155 0.0092912086 0.0070290346 0.0005027555 -0.0203863272 0.0100993750 -0.0024394646 0.0201790312 -0.0066400590 0.0361760602 -0.0362993458 0.0482070729 -0.0073135108 -0.0391038708 0.0417224019 -0.0272326146 -0.0077286665 -0.0176666592 -0.0068261614 -0.0031554804 0.0157207549 -0.0133840574 -0.0175660805 0.0356604136 -0.0083099814 0.0487371661 -0.0694939968 0.0191316292 -0.0275152494 0.0396420693 -0.0133534780 -0.0236041192 0.0301908178 -0.0049764528 -0.0154226830 0.0267956793 -0.0059922427 0.0070564095 -0.0027795744 0.0030735086 -0.0065431202 0.0006965774 0.0028036227 0.0218235445 -0.0320361629 0.0103481127 -0.0063844298 0.0128807898 -0.0047091614 0.1115952238 -0.1570219975 0.0458878651 0.1445433922 -0.2044075211 0.0546169656 0.1090081710 -0.1562320021 0.0335725345 -0.0031766787 0.0000707445 -0.0031080985 0.1382697387 -0.1238576742 -0.0005370376 -0.0641544277 -0.0884303848 0.0452170592 -0.0031333485 0.0013082454 0.0018835438 -0.0121066378 0.0177365506 -0.0099227060 0.0068039768 -0.0124956452 0.0123101662 -0.0392348113 0.0056831502 -0.0404515450 -0.0068541181 0.0364460402 0.0730042045 0.0808297392 -0.0561162559 0.0116275490 -0.0187667289 0.0205462329 -0.0378198543 0.0078650821 0.0019509331 0.0034077477 0.0038285708 -0.0004460134 -0.0021875319 0.0251621315 -0.2194366849 0.2318766724 0.0016831487 0.0447881450 -0.2230298461 0.0371808832 -0.1399149312 0.0790269731 0.3100589216 0.1222260654 0.1539049560 0.0831114417 0.1110837957 0.0687745619 -0.2204784208 0.0416557330 -0.0431329881 -0.0026338254 -0.0086624822 0.0699768583 -0.0905635212 0.0203715981 0.1338656149 0.1621199887 -0.0970674833 -0.0995143455 0.0019282785 -0.0016805583 -0.0071088666 -0.0023906947 -0.0007338779 0.0011143986 0.0058578033 -0.0025653755 -0.0105981645 -0.0147120008 0.0373089495 -0.0203357369 0.0104540476 -0.0072280088 0.0112660966 0.0014994399 0.0142082830 0.0000243090 0.0083880572 -0.0395892969 0.0223686105 -0.0001708572 -0.0007541146 -0.0135884392 0.0061062503 -0.0193329006 0.0002005276 0.0166821883 -0.0271414465 0.0205009171 -0.0101836433 0.0647919272 -0.0353427352 -0.0198918949 0.0540974650 -0.0074445862 -0.0238713765 0.0852075007 -0.0551567562 0.0013238818 -0.0210923772 0.0057610030 0.0232732942 0.0209863026 -0.0243609483 -0.0079581873 -0.0208089749 -0.0006386354 0.0508290144 0.0921757569 -0.0460986904 -0.0053927573 -0.0118758797 0.0256868481 0.0231904014 0.0325697409 -0.0015231171 0.0532410074 0.0714295954 -0.0445819008 -0.0939839081 -0.1641118188 0.0816857083 -0.0757699599 -0.1162549649 0.0315149585 -0.0864275398 -0.1593839706 0.0859867948 0.0548538574 0.0877986506 -0.0368067250 0.0096534669 -0.0145567711 0.0055755266 0.0040363013 -0.0165763643 -0.0029765816 0.0258423245 0.0307608080 -0.0119982857 0.0217564015 0.0351783550 -0.0032942772 -0.0226943573 0.0039410172 -0.0405390392 0.0203739886 0.0046650745 0.0351788663 0.0103137062 -0.0093141964 0.0106165196 -0.0059565687 -0.0046414621 -0.0175402326 0.0343307071 -0.0144785501 0.0554624153 -0.0140729337 0.0020884765 -0.0405848266 0.0030186848 0.0136220711 -0.0130557231 0.0143354830 -0.0026514587 0.0217507829 -0.0415722187 0.0199807667 -0.1039347731 -0.0130560252 -0.0076344526 -0.0309714985 0.0227672664 -0.0248803367 -0.0535495351 -0.0332077511 0.0039232930 0.0627770258 0.0020473842 -0.0361660254 0.0235678636 0.0245959352 -0.0007742681 -0.0351683667 -0.0605007383 -0.0287763951 0.1677691050 -0.0173950998 0.0320572399 0.0731812080 0.0222268892 0.0112528674 -0.0201548797 -0.0047544627 0.0127932949 0.0232851558 0.0421833952 0.0102810973 -0.0641665063 -0.0380038017 0.0074518794 0.0918699544 -0.0018379492 0.0006398129 0.0003114484 0.0004476574 -0.0053347294 -0.0045099563 0.0003790321 -0.0044792483 -0.0056537101 0.0069243144 0.0043948742 0.0077604124 -0.0029790286 -0.0003788406 0.0007475931 -0.0028798006 -0.0001751079 -0.0002828202 0.0003631839 -0.0093798437 0.0054055404 -0.0031556454 0.0016657906 -0.0065378424 -0.0086225897 -0.0011134292 -0.0009935069 0.0060371418 -0.0082733739 0.0430288292 -0.0052874323 -0.0044822213 0.0056588808 -0.0110090919 -0.0027603838 0.0096389040 -0.0072713963 -0.0082106074 0.0118900264 -0.0326190873 0.0198926270 0.0207342029 -0.0218243364 0.0056395829 -0.0166839879 0.0063829480 0.0390157337 -0.0000738337 0.0171553923 0.0194478271 -0.0379065556 0.0194107191 0.0394275068 -0.0066842182 -0.0114840777 -0.0196229822 -0.0015621233 -0.0014408672 0.0069298080 -0.0150384853 0.0092870699 0.0001250744 0.0016165909 0.0016806094 -0.0035354414 -0.0026677863 0.0068750331 0.0037049733 0.0030168596 0.0102396077 -0.0171049432 0.0281025175 0.0139489334 -0.0098499415 0.0115547329 0.0011493685 0.0017866434 0.0039336291 -0.0063859817 0.0044070019 -0.0050783420 0.0042890906 0.0017012688 -0.0102155261 -0.0129930912 -0.0020653314 -0.0049308794 -0.0058570186 -0.0049802397 -0.0004467843 0.0144474218 -0.0075873692 0.0021766863 -0.0134823686 0.0044132177 -0.0249714895 0.0292610314 -0.0365266058 0.0077157076 0.0293000676 -0.0306573609 0.0195585573 0.0036540444 0.0126406623 0.0048868587 -0.0008829970 -0.0107217527 0.0070974018 0.0079778970 -0.0222334646 0.0021405996 -0.0297173603 0.0413638821 -0.0113468089 0.0167642953 -0.0246850865 0.0082638635 0.0151061966 -0.0206864897 0.0031970565 0.0080035730 -0.0124512393 0.0031043976 -0.0030022902 0.0026798931 -0.0006845606 0.0053317237 -0.0027627636 -0.0016255194 -0.0232491179 0.0318740182 -0.0102510105 0.0108471799 -0.0153158046 0.0040187617 -0.0643607784 0.0934097110 -0.0253968996 -0.0967648735 0.1370243275 -0.0359500287 -0.0739745299 0.1015537722 -0.0219170788 0.0018497883 -0.0021152499 0.0003646309 -0.1178491080 0.1076058856 -0.0015928990 -0.0605362938 -0.0789134079 0.0402204667 0.0016500529 0.0008730157 -0.0020686381 0.0110524756 -0.0184349929 0.0126659891 -0.0061639824 0.0166614418 -0.0144999528 0.0404735745 -0.0058299339 0.0509346316 0.0158023425 -0.0440045701 -0.0853398547 -0.0874796723 0.0690601014 -0.0213276571 0.0217755167 -0.0273025287 0.0406246020 -0.0100550319 -0.0042652704 -0.0051768797 -0.0037856653 0.0002864277 0.0019821759 -0.0366769089 0.2585477507 -0.2888770157 -0.0090136758 -0.0533286579 0.2683511175 -0.0428852716 0.1698348331 -0.0816048976 -0.3437958931 -0.1572082065 -0.1513804732 -0.1350545306 -0.1310384179 -0.0896830231 0.2746255430 -0.0491472111 0.0741923907 0.0179132687 0.0043255080 -0.0905588016 0.1019219002 -0.0185937965 -0.1502045532 -0.1811915024 0.1127099874 0.1142387997 0.0012662268 0.0021433161 0.0053034217 0.0061170029 0.0007236086 -0.0033969139 -0.0078245553 0.0051992956 0.0152106195 -0.0025508142 0.0141199859 -0.0079938408 0.0063239002 -0.0000426920 0.0098239009 0.0041706047 0.0096186156 0.0053370585 -0.0034250466 -0.0147703080 0.0089823637 0.0016066582 -0.0034457389 -0.0113012481 0.0034208017 -0.0100983044 -0.0050946293 0.0017692751 -0.0004599806 0.0085630930 0.0081219274 0.0290368039 -0.0153580019 -0.0098542046 0.0167924749 -0.0011233714 0.0014535570 0.0329077600 -0.0244282738 -0.0045021140 -0.0074037840 -0.0013020271 0.0227686189 0.0188970603 -0.0213137642 -0.0101691839 -0.0269194776 0.0032914409 0.0496784609 0.0895306350 -0.0448436623 -0.0032707969 -0.0116695176 0.0236807858 0.0244474517 0.0300192288 -0.0040669650 0.0624883931 0.0745411716 -0.0469472529 -0.0724205668 -0.1387785456 0.0708082666 -0.0744393721 -0.1068701425 0.0288877730 -0.0872386488 -0.1612328348 0.0857362302 0.0467662318 0.0679423338 -0.0279816617 0.0061670060 -0.0029525967 0.0049277130 0.0028542705 -0.0053747546 -0.0056530472 0.0256618210 0.0272221704 -0.0134898990 0.0194842616 0.0343694114 -0.0007767859 -0.0136267243 -0.0006742306 -0.0222491569 0.0108676353 0.0037481575 0.0186564635 0.0059367070 -0.0105389765 0.0049711229 -0.0029956576 -0.0023679585 -0.0088206372 0.0211151478 -0.0141331965 0.0239518554 -0.0073601711 0.0030031764 -0.0243171966 0.0057844902 0.0109218559 -0.0087262953 0.0109885884 -0.0003479085 0.0097184521 -0.0164036327 0.0140372683 -0.0590256594 -0.0032748847 -0.0079368164 -0.0215384683 0.0174011883 -0.0231721651 -0.0438894455 -0.0269184993 0.0032250463 0.0507323231 0.0028781092 -0.0346765443 0.0194889788 0.0194517382 -0.0001037129 -0.0286666515 -0.0443366780 -0.0292177006 0.1391914190 -0.0140320478 0.0283926155 0.0610682877 0.0203239841 0.0114019542 -0.0145140149 -0.0008447693 0.0121697710 0.0201988252 0.0372961600 0.0107527205 -0.0520798608 -0.0257992931 0.0043181519 0.0757437509 0.0006308237 -0.0012398477 -0.0014821134 -0.0010111909 0.0029299328 0.0016231580 -0.0009391830 0.0018582023 0.0023066924 -0.0047767613 -0.0039993309 -0.0056112350 0.0036444962 0.0008392578 -0.0016867559 0.0067279155 0.0010900833 -0.0008134507 -0.0004909177 0.0072639850 -0.0047211052 0.0042906020 -0.0032889293 0.0096769918 0.0145907665 -0.0506264076 0.0703261536 -0.0061134109 -0.0900827769 -0.0304299367 -0.0125458988 -0.0871281948 0.0054268678 -0.0597661336 0.0011827270 0.0328204736 -0.0807121986 -0.0246560108 -0.0203800531 0.0170009810 0.0175758356 -0.0771444216 -0.0160166796 0.0177637635 -0.0221110042 -0.0243781286 -0.0204939255 -0.0159181852 -0.0549319866 -0.0052122933 0.0550135277 -0.0131851477 -0.0148262585 -0.1164650570 -0.0120707189 -0.0109658148 0.0770995885 -0.0161095880 0.0618760746 -0.0212212483 0.0247510162 -0.0036454811 -0.0055735396 0.0150292786 -0.0215889120 -0.0103034818 0.0019316329 0.0041133966 0.0106921862 0.0067040091 -0.0113221276 0.0219308606 0.0184288034 -0.0039227277 0.0131826191 0.0016902496 0.0048768432 0.0072104417 -0.0019129725 0.0039001870 -0.0062516268 0.0022533338 0.0031665999 -0.0042170196 -0.0124562212 -0.0008523387 -0.0038979138 0.0008752024 -0.0031164710 -0.0031843181 0.0112923871 -0.0073974197 0.0036710773 -0.0130086577 0.0075678209 -0.0158948340 0.0269946806 -0.0328672094 0.0114964447 0.0342603874 -0.0245174050 0.0166576413 0.0035110384 0.0088182027 0.0005548155 -0.0031159264 -0.0121446774 0.0013948014 0.0061177852 -0.0257084761 -0.0026974751 -0.0248517195 0.0322358322 -0.0090492227 0.0131044488 -0.0186684983 0.0035681613 0.0091984737 -0.0200962629 0.0040867631 0.0095613378 -0.0090241386 0.0045718135 0.0010888375 0.0068785672 0.0021090749 -0.0001425502 -0.0003459272 -0.0010210454 -0.0089589599 0.0036618169 -0.0011195842 0.0128873155 -0.0049963422 0.0085042328 -0.0435815064 0.0716182455 -0.0138687380 -0.0627255267 0.0923451229 -0.0178307006 -0.0508272437 0.0629960872 -0.0158365842 -0.0012975008 -0.0079062727 -0.0014488979 -0.1384497553 0.1169798213 -0.0028444750 0.0547247603 0.0526871280 -0.0275828761 0.0025800426 -0.0022568235 0.0001926653 0.0018139647 -0.0013726637 -0.0013834752 -0.0010854502 -0.0008194584 -0.0004578041 0.0031289957 0.0001132746 0.0041264729 -0.0005581779 -0.0018831420 -0.0063624813 -0.0081070100 0.0025295066 0.0001304556 0.0021462802 -0.0005873427 0.0010926691 -0.0000583503 0.0005812290 0.0005263576 -0.0007447979 0.0001710550 0.0007280454 -0.0020791986 0.0171193639 -0.0174809988 -0.0010581610 -0.0023301549 0.0130556776 -0.0038542272 0.0085641664 -0.0054426479 -0.0224249711 -0.0023565179 -0.0169438814 0.0045899076 -0.0063680304 -0.0028663247 0.0055672190 -0.0016695680 -0.0021629345 -0.0018183299 0.0007890134 -0.0009374301 0.0059453756 -0.0035588073 -0.0077745153 -0.0053835514 0.0022708562 0.0024952671 -0.0019942688 0.0000253591 0.0022858599 -0.0017946659 0.0003863615 0.0014034500 -0.0002771191 -0.0005755207 -0.0004801671 -0.0778560031 0.1825886273 -0.0982980655 0.0475884880 -0.0397157405 0.0512470583 0.0035275930 0.0662174207 -0.0101272838 0.0485093545 -0.1901515448 0.1062609761 -0.0058861512 0.0025373190 -0.0551950390 0.0285157588 -0.0848968709 0.0112026617 0.0918434734 -0.1519261872 0.1072719463 -0.0453844088 0.2890762466 -0.1677975044 -0.0873692835 0.2535338874 -0.0337439499 -0.1254620116 0.3867646888 -0.2468126776 0.0216628838 -0.1197426271 0.0510231655 -0.0071634121 -0.0300655691 -0.0111851820 0.0206715018 -0.0070594503 -0.0309325692 -0.0617468647 -0.0513964248 0.0283457631 0.0152871158 0.0173575834 0.0157152610 -0.0092578591 -0.0125532800 0.0284090364 -0.0667147381 -0.0840240955 0.0224152031 0.1038475236 0.0569270801 -0.0443890423 0.0381519840 0.0879080488 -0.0248831288 0.1032111489 0.0856285430 -0.0382225964 -0.0537678789 -0.0451034153 0.0370640020 0.0408658177 -0.0663870285 0.0198055637 0.0162923335 -0.0762606628 -0.0091256970 -0.0082632424 -0.0310356997 -0.0079152048 -0.0056429482 -0.0251390616 0.0214347613 -0.0448131679 0.0030787391 -0.0803539858 0.0390901684 0.0408639906 0.0716708409 0.0254163391 -0.0381765592 0.0169302296 -0.0079543513 -0.0243897604 -0.0351935749 0.0706193338 -0.0488271399 0.1032202692 -0.0243459705 0.0010824116 -0.1016118494 0.0387824884 0.0704852728 -0.0364877521 0.0340614167 -0.0094136185 0.0423145347 -0.0264381220 0.0797546290 -0.2450548252 -0.0254046343 -0.0591449942 -0.1013601231 -0.0137559380 0.0025485080 0.0238735886 0.0065545181 0.0142932628 -0.0152714022 0.0145304642 -0.0116746863 -0.0016752579 0.0075828811 -0.0107916854 0.0192135094 0.0372378059 -0.0148959688 -0.0380785734 0.0138346453 0.0018430741 0.0271871855 0.0075882995 0.0221975212 0.0060926046 0.0067871695 -0.0049869475 -0.0147859563 -0.0080399317 0.0240008290 0.0856683894 -0.0108813354 -0.0093437727 0.0241903589 0.0011353755 -0.0001801921 0.0003206107 0.0005180294 0.0029190767 0.0044461512 -0.0013875909 0.0019173938 0.0036465489 -0.0046839250 -0.0028254181 -0.0044045099 0.0009755316 0.0014841413 0.0007961833 -0.0022594599 -0.0034522193 -0.0030316581 0.0081356071 0.0039622374 -0.0046803512 -0.0041742649 -0.0011444668 -0.0003831894 -0.1089876806 -0.0001035573 -0.0655997567 -0.0691107583 0.0098448545 0.1169606549 -0.0491804231 0.0090620655 0.0252255888 -0.0801613234 -0.0296668985 0.0963204592 -0.0535782210 -0.0523453833 0.1461223956 -0.0547614835 0.0771997826 -0.1314777816 -0.0836126516 0.0558460804 -0.0878400716 -0.0345487152 0.0373372227 -0.0230516275 -0.0865420610 0.0429777516 0.0551709975 -0.0374824528 0.0456005998 -0.1104474638 -0.0762456558 -0.0857433672 0.1797078801 -0.0414868070 0.0795616743 -0.2059331399 0.0820315028 -0.0028231190 0.0088429993 0.0206662655 -0.0466046178 -0.0390119713 0.0315983461 0.0398608530 0.0440616294 -0.0145313274 0.0813858798 -0.0480505319 -0.0148339483 -0.0189654452 -0.0040214661 0.0004792011 -0.0085716073 -0.0106605838 -0.0118702992 0.0009308087 0.0089203365 0.0026692826 -0.0052315420 -0.0119722243 0.0036792503 0.0072423743 -0.0006723090 -0.0134714847 -0.0058183833 0.0131848486 0.0033445898 -0.0037986808 -0.0007638233 -0.0047178670 0.0035798634 -0.0166206443 0.0121222220 0.0000694604 -0.0032222384 -0.0140145430 -0.0242380172 0.0074715952 -0.0051174361 -0.0092652773 0.0162609259 -0.0118028837 0.0162543188 -0.0034641914 -0.0149178671 0.0166392556 0.0036276971 0.0387458267 -0.0605437447 0.0137101636 -0.0199429310 0.0322031842 -0.0002468538 -0.0122065143 0.0195756072 -0.0096241576 -0.0216669682 0.0234814565 -0.0081732936 -0.0016745766 -0.0079466981 0.0009219520 0.0092715084 -0.0000587666 -0.0059289520 -0.0163633927 0.0214269115 -0.0049179457 0.0098169993 -0.0012162523 0.0084871717 0.0869709797 -0.1279744784 0.0185377749 0.0904678921 -0.1211083160 0.0154463609 0.0659992009 -0.1024050913 0.0321007757 0.0083084586 0.0096576987 -0.0095520627 0.0079110500 0.0196074831 -0.0035884200 0.0271325527 -0.0042373427 0.0006737526 -0.0040159719 0.0045612897 -0.0000218354 -0.0025488063 0.0019060438 0.0039085366 0.0027343221 0.0024031816 -0.0014921686 -0.0010941430 -0.0019879367 0.0043264763 -0.0007141667 0.0028475216 -0.0020842319 -0.0012344621 -0.0011476012 -0.0023503814 0.0002439548 0.0030254470 -0.0059967704 -0.0005992763 -0.0011880417 -0.0007969372 0.0016206234 -0.0006176285 -0.0019823631 -0.0006593151 -0.0056248922 0.0015778358 -0.0024203003 0.0032491517 -0.0094198120 0.0006818584 0.0018917146 -0.0051494646 0.0099825282 0.0034220056 0.0067177499 -0.0009447200 0.0021251885 -0.0009527382 -0.0167176588 0.0038982833 -0.0010338446 -0.0023021248 -0.0008117836 0.0122544486 -0.0073065872 -0.0030798018 0.0126879223 0.0241522938 -0.0164669411 -0.0163271377 0.0036635471 -0.0002854447 -0.0041125684 0.0038334561 -0.0004708808 -0.0031191377 0.0002171044 0.0013449169 0.0012708155 0.0582830174 -0.0626643855 0.0312199752 0.0211714910 0.0620606568 0.0501332686 0.0610742258 0.0348116473 0.0789483734 -0.0973051089 0.0628825141 -0.0300546017 0.0258876000 -0.0420044033 -0.0681642500 0.0005713957 -0.0013736893 -0.0728465698 -0.0690451617 0.1537553550 -0.0129412028 0.1758709748 -0.0258701638 0.0354884021 -0.0116804675 -0.1182018912 0.0270030492 0.1822751348 -0.1335929779 0.0340637514 -0.0503291864 0.0135882809 -0.0463776001 0.0193779780 -0.0459461646 -0.0622480832 0.0400773622 -0.0586955816 -0.0723141964 -0.0674379033 0.0196040991 -0.0027975222 0.0293117666 0.0206487963 0.0778579374 0.0123083134 0.0123916582 0.0625477090 -0.0479202201 -0.0695748958 -0.0304755439 0.1380299918 -0.0923489391 0.0088923545 -0.0255542006 0.0401144738 -0.0135627949 0.1274346158 -0.0224181002 0.0326535039 -0.0233032803 0.0433334407 0.0178151238 0.0208183038 0.0440818838 0.0385947134 0.0119396209 0.0307906546 -0.0546120125 0.0189087006 -0.0301332928 -0.0398035611 0.0174745366 -0.0067764395 0.0492341987 0.0205266625 -0.0430423216 0.0660541675 -0.0565089528 0.0388806758 -0.0867847008 0.0054153477 -0.0748966209 -0.0185603555 0.0340640320 -0.0106517562 0.0485053925 -0.0808299127 -0.0627580021 -0.2891008524 -0.0262162263 0.0264065555 -0.1030378295 0.0773739469 0.0599678871 -0.0039887180 0.0224407543 0.0144504645 -0.0616302747 0.2067848843 0.0405757847 0.1194299359 0.0357723070 -0.0612076463 -0.0957479811 -0.0449058295 -0.0346232551 0.0415180476 0.0137057937 0.0344191815 -0.0292198699 0.0534603283 -0.0983972163 0.0146177224 0.0287815456 -0.0211570875 0.0413431198 0.1399156206 -0.1129091863 -0.0195602006 0.0622548040 0.0588299942 0.1001069058 0.0332525478 0.0698766821 0.0161278586 0.0256391511 0.0088031358 -0.0261111421 -0.0022103896 0.0752114588 0.1846844538 -0.0175635825 -0.0147616488 0.0833651335 -0.0031206861 -0.0009527180 -0.0027009415 -0.0003408640 -0.0068579721 -0.0064451970 -0.0012921037 -0.0072045272 -0.0098120235 0.0060310838 0.0011031176 0.0073501485 0.0002894619 0.0020940272 0.0001656537 0.0097206277 -0.0024095206 -0.0060944869 0.0077041825 -0.0029326013 -0.0012832405 -0.0027870023 -0.0044554860 0.0069565209 -0.0118347030 0.0288062493 -0.0398638867 0.1683137468 0.0460906377 0.2122958864 0.0405300455 0.0777060688 0.0116815709 0.0096077709 -0.0518124106 -0.0818014419 0.0529451502 -0.0186577689 0.0329665859 -0.0527013296 0.0007399216 0.0172311499 -0.0311598877 -0.0431034854 -0.0827456725 -0.0170878321 0.0829830884 0.0101940257 0.0093156609 0.0262000211 -0.0262984383 -0.1538017646 0.0841431460 0.2137368069 -0.0790485008 -0.0563001516 0.0624627126 0.0585089546 -0.0770021811 0.0584181465 0.0085812736 0.0507331568 -0.0673030738 -0.0014409171 -0.0036369671 0.0016231216 0.0016112580 -0.0020438977 0.0035229212 0.0060029332 -0.0347562556 0.0372844645 -0.0004273217 -0.0017308469 -0.0005253579 0.0005650844 -0.0009522223 -0.0008876033 -0.0025399665 0.0002979593 0.0016742980 0.0014781684 -0.0002124975 -0.0035812914 -0.0019327714 -0.0017090546 -0.0016739287 -0.0045052631 -0.0037673430 0.0026367045 0.0029602483 -0.0012850083 -0.0004518529 -0.0020494449 -0.0000863524 -0.0067690792 0.0024168066 -0.0051650823 -0.0056479795 -0.0029182635 -0.0082184689 0.0030280939 -0.0008477327 0.0080656750 0.0021214747 0.0010539468 0.0002089059 0.0041879696 -0.0021669820 0.0106946839 -0.0049251577 -0.0007128495 0.0001941644 -0.0010045545 0.0014835922 -0.0008318456 0.0039837293 0.0028324287 -0.0008920086 -0.0014747816 -0.0041163452 0.0011842093 -0.0016998210 -0.0030456636 -0.0028553295 -0.0011196199 0.0054031369 -0.0010935362 -0.0021286260 -0.0097686296 0.0153482128 -0.0037167704 0.0050846516 -0.0070006309 0.0039586169 -0.0029375560 0.0003214642 -0.0074126349 -0.0138364582 0.0202507930 -0.0116656163 -0.0113012199 0.0168358671 -0.0002662565 0.0024249374 0.0037372424 -0.0019352315 0.0042101095 -0.0104187745 0.0037391577 0.0004849302 -0.0036689500 0.0012743477 0.0026910464 -0.0039606228 0.0011085357 -0.0006219295 0.0017606476 -0.0051694565 -0.0002828120 -0.0009553614 0.0022274719 -0.0008216216 -0.0015650446 0.0003948381 0.0029506741 0.0031110307 0.0011268004 0.0001644255 0.0037782801 -0.0022788112 0.0011558972 0.0018035173 -0.0002887747 -0.0001045357 -0.0007216499 0.0006461994 -0.0008531946 0.0003072374 0.0010215154 -0.0047744320 -0.0068854175 -0.0029317067 -0.0054378386 0.0041225389 -0.0152605643 0.0002039294 -0.0100443692 0.0138969789 -0.0051138898 -0.0082130629 0.0034585298 -0.0128071154 -0.0058646220 -0.0054816560 0.0148313707 -0.0010625064 0.0094228499 -0.0068504800 0.0021487985 0.0058916927 0.0019097061 -0.0051813550 -0.0021083034 0.0017895956 -0.0047793323 -0.0040155690 -0.0012851498 0.0001658048 0.0006791412 -0.0019302908 0.0003763826 0.0016883970 -0.0009364381 0.0003458155 0.0002380253 0.0038902387 -0.0129468271 0.0063011494 -0.0083459531 0.0006392204 -0.0113446180 -0.0088521616 -0.0093673046 -0.0067601704 0.0007099385 0.0185260712 -0.0105448779 -0.0023171501 0.0007680286 0.0158297273 -0.0017998061 0.0026750683 0.0103420057 0.0026085745 0.0008016773 -0.0076756804 -0.0102831597 -0.0398305363 0.0218006406 0.0126829930 -0.0210554045 0.0020409651 -0.0166092667 -0.0033906151 0.0110211198 -0.0186842907 0.0494318651 -0.0223330743 0.0068930746 -0.0042721855 -0.0129773245 0.0092809879 -0.0101252258 -0.0127071366 -0.0044759530 0.0117422514 -0.0046869068 0.0050557311 -0.0007135117 0.0174563397 0.0007301724 -0.0034818735 0.0136850490 -0.0130919780 -0.0145777403 -0.0029161552 0.0101186272 -0.0403623242 0.0147035424 -0.0131694037 -0.0042504940 0.0008974835 0.0342548191 0.0081572433 0.0012372195 0.0257546506 0.0422341155 -0.0169024215 -0.0065786983 0.0044861192 -0.0056094297 -0.0022703049 0.0068233444 0.0057636384 0.0053918698 -0.0019222396 -0.0080294759 0.0043662406 0.0025968541 0.0080991177 -0.0522651298 0.0473002838 -0.1223226200 0.0841736372 -0.0601865765 0.1396659930 -0.0011366467 0.0486292754 0.0217236445 -0.0444343296 0.0126897765 -0.0640264550 0.1396414352 0.0241430506 0.3570974192 0.0169145020 -0.0270576508 0.0908641907 -0.0603178453 -0.0546031011 -0.0067003223 0.0186871056 -0.0042842257 0.0694502076 -0.2752194819 -0.0185698384 -0.2232600917 -0.0305376240 0.0614368578 0.0307730381 -0.1033203208 -0.0346003514 0.1471950699 0.0688564034 0.0336641097 -0.1308127237 0.0442682697 -0.0740304859 -0.0127233398 -0.0203083489 -0.0007465227 0.0766040729 0.2661940463 -0.1035619461 -0.2438671720 0.0576755513 0.0478788181 0.0239001979 0.0159907876 0.0497337058 0.0281093663 0.0473158460 -0.0012451293 -0.0662482916 -0.1191130855 0.0625839208 0.3668204248 -0.0110192771 -0.0272165633 0.0715266160 0.0006531266 -0.0009404893 0.0001164590 -0.0025536977 0.0029259464 -0.0008125496 0.0014018772 0.0067577994 0.0074960906 -0.0051203624 -0.0010289535 -0.0076191485 0.0001815580 -0.0005104448 -0.0005127812 -0.0086581811 0.0014044335 0.0030933412 -0.0034559055 0.0000210764 0.0012873673 0.0043380996 0.0044584554 -0.0023808288 -0.0115307750 0.0019715820 -0.0047958679 -0.0011828712 0.0061214394 0.0228817864 -0.0046998798 0.0074248669 0.0031939652 -0.0047787757 -0.0027427186 0.0030103055 -0.0002437858 -0.0063081369 0.0107669027 -0.0056324643 0.0082358411 -0.0048753708 -0.0072317886 0.0040931295 -0.0078778387 -0.0061527164 0.0014995584 -0.0028211303 -0.0083780551 0.0041633243 -0.0009199693 -0.0100834387 0.0022136706 -0.0056666417 -0.0033251684 -0.0054328323 0.0113598729 0.0011087061 -0.0033763602 -0.0114092849 0.0088573554 0.0056025470 0.0005001650 -0.0036748813 -0.0009822805 0.0001676073 -0.0011377196 0.0000246861 0.0082049951 -0.0454345899 0.0590347107 -0.2847440878 0.0552436723 0.1817670389 -0.0116000755 0.0054351613 0.0572931740 0.0661657565 0.0858174293 -0.0098269505 -0.0720360793 -0.0629552706 0.0307876701 0.1724166768 0.0509811482 0.0274080392 0.0363776353 0.1432918645 0.1118592284 -0.1060490216 -0.0879181398 0.0117236384 0.0317848360 0.0057547974 0.0898205621 0.2601732744 -0.1175478799 0.1657351296 0.0962769842 0.1136836904 0.2904937098 -0.0911796394 -0.0005414119 -0.1459992471 -0.1411110424 0.0071772590 -0.0502013451 -0.1371955721 0.0022602336 -0.0612600506 -0.1145050240 -0.0559897276 0.0887870137 -0.0079778003 0.0272711612 -0.0621975392 -0.0775410310 -0.0551654982 -0.0616736469 0.0629391603 0.0855594752 0.0374669443 0.0356044740 0.0950099505 0.0870536064 0.0480127393 -0.0947522226 -0.0504263649 0.0909787409 -0.0689660258 -0.0243573926 0.0087660495 0.0872161145 -0.0080656916 0.0028795081 -0.0595659097 0.2207617331 0.1623368579 -0.1676231631 0.2257795838 0.1759105506 -0.1089695159 0.1424533088 -0.1237112961 -0.0930660566 -0.1140856331 -0.0109987003 0.1350695147 -0.2293087516 -0.0478177350 0.0007101717 -0.0010479366 0.0004115449 -0.0145449569 0.0183141168 -0.0012215016 -0.0007219330 -0.0090419359 0.0278849527 0.0074874083 0.0075361490 -0.0058900487 -0.0016260216 -0.0000728503 0.0012234275 -0.0044777251 -0.0030432996 -0.0026380930 0.0034792144 -0.0086497258 0.0028076294 -0.0015844137 -0.0007592543 -0.0033866685 -0.0037648550 -0.0010732030 -0.0048628667 0.0033860789 -0.0017398134 -0.0059033365 0.0061640197 0.0062322617 0.0049289243 0.0057036929 -0.0043291587 0.0186659898 0.0006188010 0.0163056759 -0.0239602113 0.0219849041 0.0164541917 0.0021924198 0.0219302835 0.0128131551 0.0097262331 -0.0371055441 0.0044556293 -0.0136079170 0.0072938758 -0.0035263048 -0.0005207982 -0.0074507129 0.0054972241 0.0110272332 0.0121133398 -0.0036082584 -0.0045956062 0.0116748232 0.0004555155 -0.0074520687 0.0169623463 -0.0017333830 -0.0138501843 -0.0006336085 0.0040784096 0.0071455491 0.0043630551 -0.0083138789 0.0050116256 0.0011934190 0.0067269382 0.0002784785 0.0066632435 -0.0002631966 0.0068686386 -0.0079059982 0.0095208927 -0.0042995741 0.0039395985 -0.0042250241 -0.0035335373 0.0011914701 0.0012400643 -0.0053348331 -0.0009347503 0.0103499484 -0.0018762434 0.0100918556 -0.0039130153 0.0061840830 -0.0017565076 -0.0149923975 0.0035113543 0.0145168413 -0.0087390195 0.0027929847 -0.0052579906 0.0110714237 -0.0098574376 0.0020148979 -0.0035971032 -0.0055378090 0.0037079162 -0.0053133183 -0.0067201069 -0.0052621828 0.0031117790 -0.0011363458 0.0036647414 0.0012150873 0.0080868133 0.0018459329 0.0011393603 0.0063316747 -0.0037352532 -0.0057670850 -0.0028674781 0.0104834871 -0.0115247930 0.0023243104 -0.0038576176 0.0015387333 -0.0008049073 0.0128493186 -0.0052994279 0.0041646028 0.0007643929 0.0053272729 0.0022664563 0.0011871267 0.0058320862 0.0047470794 -0.0000462095 0.0031589050 -0.0054848492 0.0021796986 -0.0021512549 -0.0039458395 0.0018786394 0.0003596115 0.0046917659 -0.0010761419 -0.0013446130 0.0002443292 -0.0000891451 0.0008522172 0.0006828545 0.0013075336 -0.0047085280 -0.0012180273 0.0019700660 -0.0011175062 -0.0007350717 0.0023017098 -0.0052452210 -0.0048662390 0.0037236548 0.0016440523 -0.0028466522 0.0020883408 0.0025797326 -0.0008486652 0.0012769322 0.0008839486 -0.0010863213 0.0046981404 0.0022390608 0.0001702727 0.0021826872 -0.0004367595 -0.0007329948 -0.0042273538 -0.0040080669 0.0027706232 0.0007690051 0.0025633798 -0.0033111522 0.0035088192 -0.0091334581 0.0016475154 0.0013422064 -0.0010322612 0.0028738070 0.0135806464 -0.0106548950 -0.0021182633 0.0051852747 0.0038985350 0.0040144652 0.0042160868 0.0060447475 0.0021196118 0.0044410997 0.0016565925 -0.0003236914 0.0018025012 0.0065543133 0.0139928672 0.0030913664 -0.0026612307 0.0070073997 0.0000719617 0.0096179538 0.0085901845 0.0233955254 -0.0209270069 0.0113116611 -0.0066981900 -0.0471289011 -0.0449550424 0.0410897535 0.0118751075 0.0604202936 -0.0059312773 -0.0001891207 -0.0008442890 0.0413209991 -0.0033158598 -0.0139072602 0.0021546928 -0.0130886002 0.0020232988 -0.0177038829 -0.0245357029 0.0176633885 -0.0668393002 0.0306650583 -0.0397421241 -0.0034972132 0.0429064784 0.1762805661 -0.0267624717 0.0511068054 0.0428086823 -0.0634468071 0.0105772042 -0.1269823323 0.0762277294 -0.0546963047 0.0964813653 0.0945578857 0.0341755417 -0.1251155597 -0.0794910343 0.0114590894 0.1448187676 -0.0297581301 -0.0284594303 -0.0428744259 -0.0741474777 -0.0062870422 0.0573229408 0.0205130672 -0.0220763726 -0.2100067154 0.0543667160 0.0290613417 0.0296512082 0.0649691587 -0.0678715366 -0.0050959444 -0.0379104862 0.0095148894 -0.0125844137 -0.0118100550 0.0283278298 0.0149901705 -0.0169824781 -0.0225448790 -0.0163673771 0.0110046392 -0.0822756965 0.0605049075 0.0125182930 -0.0084003701 0.0061426080 -0.0015096572 0.0012866486 -0.0005107646 0.0007307371 -0.0003911595 0.0000870918 -0.0027887060 0.0026632521 -0.0007388428 -0.0001236707 -0.0019568936 -0.0006536713 0.0027514026 -0.0032204123 0.0013337118 0.0016483100 -0.0005257203 0.0002043007 0.0159212106 -0.0147393787 0.0101839261 -0.0056933288 0.0027171189 -0.0051190643 -0.0166895090 0.0115496553 -0.0093968469 -0.0029181052 0.0109492812 -0.0045022034 0.0098609928 0.0008944833 0.0117009453 -0.0022913160 0.0295853436 -0.0020522063 -0.0035725201 0.0076622734 -0.0010395413 0.0015007413 -0.0011985965 0.0038980925 0.0030004499 0.0035806157 -0.0020425122 -0.0011542282 -0.0083516430 -0.0004898408 -0.0050906679 -0.0061189543 -0.0038266244 0.0022873957 0.0041699200 -0.0036238451 0.0189631837 -0.0176360824 0.0038365115 -0.0178653389 0.0060962166 -0.0084131823 -0.0168364753 0.0141579237 -0.0148191174 0.0046825126 -0.0074913765 -0.0080827447 -0.0002261991 0.0085012085 0.0012211480 -0.0014490040 0.0039216264 0.0017288703 0.0696948810 -0.0705514577 0.0039271015 0.0033867713 0.0106532441 -0.0043430044 0.0034463110 -0.0037399454 -0.0019972643 0.0023443463 -0.0019021674 -0.0084271420 -0.0036222060 -0.0043641451 0.0014321650 -0.0003965895 -0.0031965166 -0.0051228585 0.0009496223 0.0050356171 0.0051227254 0.0002484478 0.0056741227 0.0030744113 0.0029497512 0.0051256986 0.0035035855 0.0024192338 0.0023354361 0.0014820831 -0.0013269281 0.0010364280 0.0024317553 -0.0016271072 -0.0184117302 0.0131791897 -0.0028337859 0.0061601863 -0.0258298311 0.0023284070 -0.0185442512 0.0152509365 -0.0203227270 -0.0089307407 -0.0099949122 0.0034174673 -0.0078802705 -0.0013182673 0.0301728612 -0.0039018704 0.0055509494 -0.0242843296 0.0088439205 0.0147554110 0.0095719868 -0.0139285931 -0.0132589726 -0.0090919655 -0.0050757160 -0.0026085806 -0.0059763941 -0.0001476760 0.0039595465 -0.0068687345 -0.0000230325 0.0053955745 0.0015901443 -0.0029240417 -0.0051041695 0.0043039010 -0.0161739642 0.0088586450 0.0110129592 0.0033353929 0.0092477467 0.0188131948 0.0058141547 0.0201818023 -0.0325210023 0.0347943155 -0.0171223395 0.0191799145 -0.0211877004 -0.0129171473 0.0129934769 -0.0143879599 -0.0078501003 -0.0393461240 0.1046158931 -0.0433293460 0.0324603288 0.0197820356 -0.0041642493 -0.0047039353 -0.0468151089 0.0116396374 0.0240889116 0.0559178868 -0.0386135674 -0.0588594149 0.1256422608 -0.0870118906 0.0144580907 -0.0023795406 -0.0136995606 0.0205994928 -0.0086247253 -0.0233623008 -0.0401117145 -0.0259424233 0.0153231960 0.0203415571 0.0140450000 0.0154050652 0.0151741369 0.0108918417 0.0066290108 -0.0789825150 -0.1204502448 0.0429243018 0.0194913125 -0.0542211112 0.0168687268 0.0069609080 0.0462576414 -0.0140297610 0.0080715879 -0.0544451008 0.0304308416 -0.0832348501 -0.1075163978 0.0688907016 0.0048099224 0.0156362594 0.0160855959 0.0025266230 0.0106532410 -0.0202316157 -0.0003580957 -0.0181372908 -0.0153650514 0.0009264586 -0.0097181948 0.0214131533 -0.0377549051 0.0078500067 -0.0463495485 0.0580122535 -0.0050001850 0.0935534657 0.0017053495 -0.0137822194 -0.0295717121 -0.0064000409 -0.0126653531 -0.0663083968 0.1793291359 -0.0508334183 0.2941811494 0.1371893662 -0.0107292092 0.1392570930 -0.0047080259 0.0059487500 0.0048345269 0.0122145281 -0.0021973278 0.0459145093 -0.1760730424 0.0321263773 -0.2581685057 -0.0452253789 0.0318957830 -0.0335490822 0.0676540508 -0.0138293647 -0.1186569886 -0.0468735514 0.0012684696 0.0656696292 -0.0065602130 -0.0077549570 0.0023779260 0.0208701945 -0.0026463398 -0.0536156089 -0.2000504087 0.0172278061 0.2904752495 -0.0545142683 -0.0095743874 0.0540827797 0.0057262584 0.0117212842 0.0271655972 -0.0077572151 0.0153229179 0.0710880769 0.1977718587 -0.0026200021 -0.3330827515 0.1247011496 -0.0212840921 -0.1389579067 0.0037372383 0.0009288484 0.0037328643 -0.0015815303 0.0088400795 0.0047263615 0.0040432084 0.0126066173 0.0153712340 -0.0058898368 0.0011831939 -0.0095606999 -0.0041854856 -0.0041022547 -0.0003756001 -0.0142588249 0.0040956302 0.0094905457 -0.0166585344 -0.0044092614 0.0066118566 0.0057475056 0.0063087856 -0.0034748330 -0.0580542535 -0.0167651641 -0.0929689635 0.0718698086 -0.0927546694 0.1443597733 0.0010296381 -0.0713696504 0.0185864496 -0.0915536485 0.0360059668 -0.0947615819 0.0292577299 -0.0251344902 0.1843023747 -0.0087340011 -0.0107219728 0.1511970405 0.0799961735 0.0073138078 -0.0620600101 -0.0337344989 -0.0697727122 0.0026175691 0.0279959180 -0.0286106035 -0.0828041030 -0.1085695462 -0.0723340690 0.1128859758 0.1304154271 0.0711019368 -0.1112990051 -0.0892880161 0.0934620864 -0.1296634989 -0.0138240296 -0.0624210940 0.0953197658 -0.0092284890 0.0150710846 0.0041119944 0.0095059019 0.0034754135 0.0017538448 -0.0167246432 0.1267338885 -0.0991249876 -0.0132903133 0.0013172799 -0.0029661923 0.0002575713 -0.0026443607 -0.0001375612 -0.0030073299 0.0021966108 0.0000921531 0.0039461678 -0.0027361518 -0.0046644193 -0.0015698242 0.0012162105 0.0007323061 -0.0019736641 0.0006329890 0.0003201224 0.0009415164 0.0006977248 -0.0009457601 -0.0124208944 0.0066970335 -0.0162251370 0.0045360230 -0.0039689042 0.0058030722 0.0100760254 -0.0121833614 0.0057454272 0.0053994336 -0.0120078678 0.0091153197 -0.0074408812 0.0015997344 -0.0035457324 0.0115093357 -0.0481860153 0.0297267422 0.0039752837 -0.0049124199 0.0016879409 -0.0030743256 0.0028019041 -0.0044113747 -0.0021204755 0.0053282338 -0.0003255097 0.0044250745 -0.0050338943 0.0024079910 0.0035142789 -0.0005854122 0.0007716528 -0.0052206841 0.0036695370 -0.0000173341 0.0168433230 -0.0196222267 0.0044281922 -0.0243296149 0.0301697247 -0.0087530079 -0.0052395994 0.0089355541 0.0034569781 0.0282629882 -0.0407759741 0.0120659331 0.0155110320 -0.0238785941 0.0019344501 0.0037062287 -0.0020678133 0.0046074835 -0.0873203363 0.0962911463 -0.0057155808 -0.0037860337 -0.0093503845 0.0007021133 -0.0058649084 0.0063127586 0.0031798191 -0.0036862183 0.0039046604 0.0158333392 0.0048132727 0.0060727183 -0.0021790186 0.0055448548 0.0110861691 -0.0013153127 -0.0104533668 -0.0141983033 -0.0028652271 -0.0002632365 -0.0214807393 0.0042579776 -0.0099693864 -0.0129620451 -0.0003776505 -0.0031620374 -0.0030671941 -0.0027060858 0.0022760845 -0.0017753952 -0.0037651483 0.0183067579 0.0249779744 0.0116629641 0.0203512990 -0.0182201309 0.0652613772 -0.0008517745 0.0421461562 -0.0523608793 0.0453699029 0.0415164289 0.0029099620 0.0403003087 0.0333364156 0.0220492721 -0.0904188066 0.0081647135 -0.0424987505 0.0522886853 -0.0174832139 -0.0406647970 -0.0201399598 0.0391420457 0.0244574611 -0.0040127653 0.0297714421 0.0240972413 0.0101536027 0.0002258178 -0.0056291493 0.0111550595 0.0003524211 -0.0086457816 -0.0018213804 0.0038782087 0.0077291470 0.0001095373 -0.0100150450 0.0034697199 0.0198618463 -0.0054322842 0.0208574875 0.0278369538 0.0010195377 0.0208686706 -0.0184856232 0.0111239657 -0.0086412884 -0.0005000433 -0.0008535680 -0.0171032892 -0.0019642794 0.0092485815 -0.0071764381 -0.0521544369 0.1637033776 -0.0619297959 0.0120109459 0.1035183825 -0.0580357554 -0.0104233709 -0.0174630474 0.0066198155 0.0400261152 -0.0674585876 0.0247720851 0.0021560988 -0.0303388859 0.0302735484 -0.0259168497 -0.0145174359 0.0187008542 -0.0296447993 -0.0123895183 0.0211799344 0.0043001665 -0.0038395296 -0.0025748836 0.0182708772 0.0226370313 -0.0182276290 0.0232125531 0.0316474162 -0.0106600263 0.1284112591 0.1959918615 -0.0773866689 0.0903841760 0.1811221774 -0.0888283636 0.0108586720 -0.0053148343 0.0021411210 -0.1277373253 -0.1838261891 0.0833129876 -0.1216649660 -0.1802784625 0.1159034486 0.0052770386 0.0072711608 0.0141721522 0.0038263967 0.0037315899 -0.0148256743 -0.0024285328 0.0041373780 0.0102564262 -0.0036822412 0.0007088162 -0.0091235654 -0.0328970563 0.0057050908 -0.0445612542 0.0380356430 0.0262653196 0.0903454439 -0.0034647818 -0.0152899314 -0.0271768450 -0.0158794834 -0.0202938020 -0.0488156436 0.1461539233 -0.0460729476 0.2589365668 0.0927766495 -0.0310471611 0.1248060476 0.0362126704 0.0465168036 -0.0083879933 0.0275822019 -0.0062907879 0.0313760132 -0.0825237709 0.0650024767 -0.2663365888 -0.0227841126 -0.0365639184 -0.0818720005 -0.0178156238 0.0271958269 0.0728865178 0.0236263058 -0.0029526548 -0.0371386902 -0.0181152576 0.0476668193 -0.0125600090 -0.0277249074 0.0044616296 0.0190689838 0.0554266992 0.0400097964 -0.1916007617 -0.0103977886 -0.0400639907 -0.0676076749 0.0007105156 -0.0119518569 -0.0162979850 0.0128410877 -0.0171861113 -0.0304241830 -0.1021739061 -0.0041116867 0.1812849345 -0.0523998603 -0.0129834752 0.0858068587 -0.0066173650 -0.0017212098 -0.0073686856 0.0017110201 -0.0138595179 -0.0084656176 -0.0070476826 -0.0207510636 -0.0264500523 0.0081377538 -0.0026239690 0.0134948964 0.0079380597 0.0066164983 0.0007430946 0.0262183364 -0.0037117404 -0.0130004384 0.0251882874 0.0089237372 -0.0097776337 -0.0091344189 -0.0094840872 0.0015648624 -0.0057536519 -0.0011687897 -0.0119300197 0.0047933341 -0.0108295138 0.0127876390 0.0005418182 -0.0093887143 0.0030416269 -0.0115002842 0.0062791924 -0.0165848016 0.0065127590 -0.0020862700 0.0226984121 0.0022822318 -0.0065402734 0.0117656420 0.0087460136 0.0004161553 0.0011641659 0.0012106295 -0.0122331353 -0.0001005299 0.0047128207 -0.0065379127 -0.0034856915 -0.0078190109 -0.0119988140 -0.0001940785 0.0148918583 0.0099031909 -0.0123983763 -0.0106811825 0.0105095064 -0.0143999653 -0.0020723094 -0.0080814469 0.0107028709 -0.0019361244 0.0024804738 0.0010605341 0.0019685399 -0.0015110572 -0.0000795327 -0.0106536354 0.0836503424 -0.0602371779 -0.0134790436 0.0065562933 -0.0050785180 0.0009522837 -0.0018672659 0.0008432179 -0.0017359033 0.0014490204 0.0007068320 0.0045108184 -0.0024054672 -0.0030985104 -0.0021112691 -0.0007754709 -0.0000674353 -0.0034736952 0.0005893651 -0.0004821824 0.0004029718 0.0012389602 -0.0014733708 -0.0143045836 0.0092925947 -0.0160072292 0.0035303479 -0.0054995563 0.0018653306 0.0117776361 -0.0130684345 0.0073984303 0.0048333203 -0.0062370546 0.0069197226 -0.0056615651 0.0000032992 -0.0031978349 0.0098122406 -0.0385170511 0.0200166097 0.0021305615 -0.0031237652 0.0010303954 -0.0012133636 0.0009508050 -0.0026706609 0.0000074746 0.0004331044 0.0003895391 0.0009911754 0.0001667070 0.0009548072 0.0014195059 0.0016696769 0.0004980273 -0.0011475804 -0.0005179202 0.0005081340 -0.0033551616 0.0055716000 -0.0020167846 -0.0029189170 0.0053774716 0.0000119909 0.0041155668 -0.0041657054 0.0050128851 0.0036218054 -0.0050315114 0.0033097244 0.0041095486 -0.0084562265 -0.0003716773 0.0029712239 -0.0009182303 0.0031913257 -0.0619305547 0.0618887861 -0.0013638639 0.0075783179 0.0029382006 0.0028727071 -0.0049634075 0.0025537840 0.0094309825 -0.0055656144 0.0087351681 0.0182884487 0.0100184298 0.0143054907 0.0012393302 0.0019866604 0.0130022918 0.0009188206 -0.0049411612 -0.0189818049 -0.0066571699 0.0022820140 -0.0204256676 0.0017374393 -0.0082170880 -0.0189431007 0.0009589092 -0.0085621196 -0.0087939726 -0.0048392910 0.0017676466 -0.0026921818 -0.0045689877 0.0102135628 0.0444337883 -0.0187320055 0.0122902423 -0.0231111930 0.0875712956 -0.0073692695 0.0479753423 -0.0367348926 0.0463792185 0.0320168489 0.0092397571 0.0282470817 0.0336917345 0.0192735481 -0.0888048920 0.0083223257 -0.0360914795 0.0657227337 -0.0217426486 -0.0588242563 -0.0134715759 0.0429718745 0.0143740574 -0.0161120516 0.0410465377 0.0345148898 0.0164564461 0.0012098156 -0.0079892705 0.0177810796 0.0014219475 -0.0131389966 -0.0079401604 0.0102787045 0.0190782712 0.0002271510 -0.0013074336 0.0001225110 0.0031957092 -0.0048583411 0.0053091707 0.0035855416 -0.0032109470 0.0042508764 -0.0014664368 0.0019283643 -0.0017071812 -0.0020416515 0.0032068536 -0.0035830840 -0.0022832835 0.0035438939 -0.0023782017 -0.0207959738 0.0452590945 -0.0205615937 -0.0092896794 0.0340323437 -0.0182419616 0.0009347633 -0.0022897818 0.0003396872 0.0120337317 -0.0305444169 0.0147733850 0.0083515547 -0.0228847098 0.0148352298 0.0353495457 0.0496028183 -0.0246040936 0.0302677905 0.0561281890 -0.0265553548 0.0081950830 0.0045875313 0.0001085135 -0.0425542020 -0.0558481717 0.0253934654 -0.0452991966 -0.0489887581 0.0268582877 -0.2658728334 -0.3299717330 0.1620378420 -0.2652980262 -0.3352774033 0.1678562447 0.0017618257 -0.0108029288 0.0024542356 0.2533459011 0.3637480049 -0.1806597772 0.2669111046 0.3632141929 -0.1996889288 -0.0004073338 0.0005789508 -0.0000144377 0.0004640723 0.0009475608 0.0001905022 -0.0007603833 0.0050024815 0.0055310036 0.0012184556 0.0002481659 -0.0075510313 -0.0039568115 0.0006932756 -0.0051716402 0.0052323438 0.0030206725 0.0113252809 -0.0011976052 -0.0011022567 -0.0046032379 -0.0024171838 -0.0024341544 -0.0072443025 0.0223532114 -0.0058711701 0.0411290468 0.0150131333 -0.0043430730 0.0210242419 0.0042409643 0.0050914215 0.0004020751 0.0032696557 -0.0010714350 0.0053079995 -0.0172678983 0.0084308430 -0.0408907832 -0.0068171025 -0.0033221723 -0.0144641983 0.0029673185 0.0066184274 0.0037946804 0.0021288109 -0.0012938448 0.0007002928 -0.0026556997 0.0118011281 -0.0021868875 -0.0002643063 -0.0010570031 0.0005478459 -0.0112429367 0.0131402276 -0.0112734519 -0.0029376474 -0.0067112204 -0.0033205640 -0.0032996638 -0.0026926201 -0.0025429670 -0.0046223621 -0.0039893739 -0.0029560855 -0.0058506953 -0.0028481990 0.0021665984 -0.0078822495 0.0004216799 -0.0016995285 -0.0112216381 -0.0074547055 -0.0127962880 -0.0079218201 -0.0201705022 -0.0274142595 -0.0041425735 -0.0165134991 -0.0256232847 0.0037798430 -0.0041619592 0.0028494929 0.0143143487 0.0092047380 0.0001497715 0.0203756736 -0.0014977113 -0.0111648805 0.0351256336 0.0171536211 -0.0152310755 0.0000566369 -0.0022219478 -0.0032098299 0.0224422363 0.0059966147 -0.0049971134 0.0126403376 0.0094768495 -0.0231005707 0.0186035669 0.0069355822 -0.0065556133 0.0080818249 -0.0023091161 -0.0041512004 0.0077859050 0.0115820348 -0.0092761110 0.0059868388 0.0000265546 -0.0361369101 -0.0242787312 -0.0019078669 0.0245495950 0.0088211915 0.0181505747 -0.0018698152 -0.0018112019 0.0008844874 0.0187681484 0.0167622739 0.0185666612 -0.0117779951 -0.0262730141 -0.0160377590 0.0261470370 0.0023906273 -0.0050824953 0.0129178885 0.0046564459 0.0087911252 -0.0173559632 0.0026367162 -0.0059610046 0.0003916824 0.0047168968 -0.0046175980 0.0045429229 -0.0239607408 0.2018578471 -0.1324298082 -0.0477755598 0.0313646117 -0.0230320439 0.0050701525 -0.0064293199 0.0033015217 -0.0048174759 0.0042439996 0.0038863412 0.0160234611 -0.0091142420 -0.0061804497 -0.0082072722 -0.0029577474 -0.0021901024 -0.0159847866 0.0026027275 -0.0022073476 -0.0004876683 0.0036983089 -0.0046882905 -0.0603417137 0.0446000849 -0.0563602793 0.0201340143 -0.0264645814 0.0054678218 0.0495258746 -0.0549961559 0.0320650907 0.0163614015 -0.0106707247 0.0182499024 -0.0186216700 -0.0072697163 -0.0111865674 0.0308046635 -0.1239783596 0.0509660159 0.0036957498 -0.0066193768 0.0011420454 -0.0025201540 0.0006856635 -0.0079901437 0.0008964612 -0.0012357404 0.0022240238 0.0035937807 0.0042855724 0.0024789973 0.0052149486 0.0079316353 0.0029554867 -0.0028775573 -0.0043515056 0.0028836700 -0.0183584291 0.0265128073 -0.0080182625 0.0070862796 0.0040850532 0.0071816583 0.0159895933 -0.0148947567 0.0203215976 -0.0041011912 0.0048754221 0.0070157572 0.0034713627 -0.0158125135 -0.0037581856 0.0109158000 -0.0014958510 0.0066163451 -0.1941177931 0.1727054609 0.0016703342 -0.0011667302 -0.0052359177 0.0014147149 -0.0153025437 0.0060954442 0.0365112012 -0.0191030102 0.0333098642 0.0655818647 0.0366362920 0.0524148780 0.0050596254 0.0143137396 0.0426284298 0.0126384511 -0.0262798839 -0.0594747304 -0.0239883951 0.0048002184 -0.0825615855 -0.0044101699 -0.0395120829 -0.0603042886 -0.0114841507 -0.0315183883 -0.0322811048 -0.0176167849 0.0050256430 -0.0096038905 -0.0154410779 0.0464657007 0.1351439281 -0.0315751512 0.0539579398 -0.0736590961 0.2746020601 -0.0158977064 0.1718146734 -0.1681242596 0.2173149096 0.1443434823 0.0633429299 0.0743496752 0.1284871275 0.0638477761 -0.3675839492 0.0377046173 -0.1310400195 0.2436055888 -0.0848038602 -0.1817352048 -0.0890012872 0.1659366385 0.1114649734 0.0078341915 0.1142120677 0.0888056849 0.0592377163 0.0047733500 -0.0279174553 0.0637134380 0.0056322792 -0.0467863090 -0.0304096837 0.0376165658 0.0715928163 0.0051263758 0.0015904134 -0.0023368255 -0.0054380779 -0.0086860913 0.0037452521 -0.0091659367 -0.0113381004 -0.0029126619 0.0100396974 0.0001041187 -0.0015971216 -0.0112490817 0.0095121056 0.0062029366 -0.0093130158 0.0052730780 0.0013362034 -0.0268461911 0.0249078592 -0.0164081951 -0.0344929648 0.0247092053 -0.0134756822 0.0157209062 0.0053605648 -0.0043690414 -0.0055202195 -0.0513934757 0.0305249622 0.0126043431 -0.0445449982 0.0323148081 -0.0104093523 -0.0140390055 0.0025079406 -0.0062032649 -0.0127699245 0.0055188587 -0.0072596444 -0.0080244611 0.0039261266 0.0128736448 0.0225556840 -0.0104608680 0.0139418658 0.0211065240 -0.0093228376 0.0615634625 0.0801838919 -0.0425745536 0.0733814227 0.0867776581 -0.0418700647 0.0078238694 0.0032150512 -0.0027495706 -0.0940303903 -0.1294760346 0.0639921425 -0.1103068876 -0.1334144439 0.0715723594 -0.0078419101 -0.0042158287 -0.0144593008 -0.0010776073 0.0015365869 0.0167326794 -0.0018183494 -0.0000270368 0.0028436914 -0.0006570847 -0.0008031421 -0.0022000152 0.0057119866 -0.0014844323 -0.0046162594 0.0001054636 -0.0150328867 -0.0038977282 -0.0084622046 0.0050159500 0.0054970313 -0.0145037725 0.0156619808 0.0093080761 -0.0026489747 0.0046072660 0.0046015584 -0.0249131222 0.0030306426 0.0149215788 -0.0090068209 -0.0227759198 0.0037205473 0.0078404139 0.0033950172 -0.0037278685 -0.0338092744 -0.0178608045 0.0120878105 0.0051791958 0.0065265485 -0.0049430919 0.0045281560 -0.0065683876 -0.0184620732 -0.0059815549 0.0015074134 0.0082006336 0.0051892344 -0.0101334920 0.0006112992 0.0085981951 -0.0012640372 -0.0071537833 -0.0285641014 -0.0061759929 0.0636450194 -0.0061313279 0.0100385913 0.0305437689 -0.0021156198 0.0024362318 0.0065754199 -0.0042505225 0.0042611310 0.0094193368 0.0350824025 -0.0004692286 -0.0623599616 0.0176764572 0.0038734996 -0.0308128908 -0.0402767752 -0.0283327561 -0.0466368038 -0.0317071355 -0.0717540809 -0.1029999975 -0.0140650346 -0.0555781355 -0.0879222563 0.0096895043 -0.0164519378 0.0037909696 0.0536028041 0.0332514681 -0.0018104187 0.0572562899 -0.0018299128 -0.0366588747 0.1208091199 0.0594355835 -0.0510351090 0.0067594246 -0.0046156853 -0.0140913752 0.0886058189 0.0095084547 -0.0475841550 0.1634021257 0.0187508924 -0.0558144417 0.1103064026 0.0273349847 -0.0539310629 0.0169883767 -0.0275510145 0.0188602738 0.0040332488 0.0435547576 0.0112187996 0.0176667471 0.0467422855 0.0249221868 -0.0173894339 -0.0252237951 0.0143505907 -0.1137661835 0.0737690069 -0.0627379269 -0.0947530528 0.0431347098 -0.0555284031 -0.1873480138 0.0838170458 -0.0545230376 0.0930196333 0.0439983577 -0.0366429367 -0.0609899141 0.0550509938 -0.0278063410 -0.0099845971 -0.0328728814 0.0427146677 -0.0010308684 0.0045385136 0.0045301849 -0.0047327333 -0.0030916846 -0.0014661886 -0.0021317097 0.0088314697 -0.0114420263 0.0032975530 -0.0029732736 0.0015836902 -0.0005292455 0.0002741963 -0.0007010542 0.0016242239 -0.0009354202 -0.0002631768 -0.0013776586 0.0005864060 0.0004228966 0.0012285694 0.0003332528 0.0006451372 0.0019870927 0.0004052100 -0.0001055041 -0.0006167242 0.0006061490 0.0000986605 0.0063745127 -0.0048847553 0.0054810159 -0.0039013502 0.0045117592 0.0001284282 -0.0014856414 0.0048131163 -0.0008881141 -0.0008255656 -0.0022432264 -0.0004997448 0.0013378323 0.0033374113 0.0002374601 -0.0011936119 0.0076834922 0.0001297682 0.0006387715 -0.0002636328 0.0001619936 0.0005498933 -0.0008274156 0.0000722467 -0.0014102497 0.0031712088 -0.0004675865 0.0013005766 -0.0036558026 0.0008178155 0.0005543020 -0.0028372382 -0.0003454993 -0.0015280820 0.0023110931 -0.0003068850 0.0142278307 -0.0186055552 0.0062088466 -0.0131718416 0.0150252290 -0.0043083915 -0.0111991588 0.0146914052 -0.0058313908 0.0084516588 -0.0131270374 0.0019396166 -0.0004912525 0.0040334748 -0.0011421709 -0.0010372381 -0.0005405552 0.0008861754 0.0127592337 -0.0068600890 -0.0016277290 -0.0402779608 -0.0022351529 0.0025744601 0.0012643450 0.0010980647 -0.0076003758 0.0023983119 -0.0071557078 -0.0103073510 -0.0070718573 -0.0101512210 -0.0021196029 -0.0007577903 -0.0095771584 0.0001114122 0.0032726334 0.0131630831 0.0034702252 -0.0016889405 0.0162205040 -0.0013738835 0.0053359074 0.0130038685 -0.0008313709 0.0067198354 0.0066988643 0.0032879644 -0.0001649737 0.0017100941 0.0021725478 -0.0074568656 -0.0304575540 0.0111387895 -0.0101001536 0.0160111784 -0.0588902548 0.0039079210 -0.0307158469 0.0250912273 -0.0398365187 -0.0278721905 -0.0097276119 -0.0244251589 -0.0245607187 -0.0146700434 0.0690734410 -0.0070161184 0.0261505666 -0.0440064932 0.0146010895 0.0403627695 0.0081416195 -0.0284607687 -0.0080775581 0.0115057292 -0.0276715003 -0.0234920381 -0.0101573760 -0.0010998488 0.0037492808 -0.0109017668 -0.0016677270 0.0077604846 0.0070597688 -0.0077459397 -0.0147478675 0.0290247137 -0.0054219622 -0.0023378185 -0.0230217376 -0.0137167188 -0.0060023529 -0.0381179204 -0.0355616278 -0.0281049134 0.0555989545 -0.0388069323 0.0151220318 -0.0563826286 0.0532356595 0.0296516864 -0.0434488823 0.0438082062 0.0091462584 -0.0156194035 -0.0287631439 -0.0008100814 -0.1114709420 0.0298539516 -0.0242341586 0.0339952309 0.0635640812 -0.0210363375 -0.0164126696 -0.2623498112 0.1613329081 0.1007382360 -0.2726801054 0.2033266385 0.0461397415 0.0105707743 -0.0255011399 0.0488629863 -0.0215860019 -0.0525403631 -0.0692992272 -0.0216824929 0.0132406716 0.0537499620 0.0078969360 0.0554774744 0.0423202689 0.0151670618 0.0248949897 -0.1476446696 -0.2382466970 0.0918479239 -0.0090561513 -0.1997731336 0.0764769627 -0.0239493743 0.0757332486 -0.0236610186 0.0782193478 -0.1235832511 0.0592557438 -0.0471481162 -0.1259977367 0.1168721082 -0.0194270650 -0.0254164724 -0.0459098495 -0.0036587758 -0.0092493965 0.0551728196 0.0112537450 -0.0375002985 -0.0526818676 0.0085163291 -0.0064427508 0.0649987042 0.0384726223 -0.0051342830 -0.0212706695 -0.0170920528 -0.0739124695 -0.0223079199 -0.0442509712 0.0150902704 0.0344531935 -0.0816937720 0.0827657809 0.0659927658 -0.0504782085 0.0200784461 -0.0492111915 -0.1724308269 0.0063705687 0.0572236186 -0.0292933144 -0.1101647044 0.0069041728 0.0582317151 0.0242803818 -0.0425409238 -0.1126246850 -0.0908430004 0.1201980753 0.0756660212 0.0064761915 -0.0179451692 -0.0075690492 -0.0895939143 -0.0256149429 -0.0455586978 0.0057892512 -0.0243407988 -0.0131199990 -0.1346234551 0.0061174174 -0.0633002950 0.0551158472 -0.0505902964 0.1063007408 -0.1495002222 0.1164421915 -0.0878999253 0.0353272705 -0.0315446952 0.0569579008 -0.0074238859 0.0367029731 0.1294060116 0.0616309449 0.0773802720 0.0435462106 0.0000068431 -0.0388531061 0.1893593181 -0.0578663730 0.0877001185 0.0071346590 0.0064903938 0.0085043003 0.0089470743 0.0118048087 0.0224202333 0.0004703184 0.0048534927 0.0103632506 0.0012467389 0.0030055156 0.0054508072 -0.0100034871 -0.0053786160 0.0011252667 -0.0028601445 -0.0018131731 0.0032216299 -0.0181325066 -0.0105064386 0.0079346343 -0.0067015189 -0.0034862067 0.0039121194 -0.0199141776 0.0018912285 0.0055857314 -0.0231170982 0.0107920216 0.0393555243 -0.0183153384 0.0107058480 0.0084495210 0.0055143598 0.0020018513 -0.0044887112 0.0053818554 -0.0066749654 -0.0070881389 0.0009816316 -0.0017871235 -0.0104758733 -0.0016176346 0.0048138812 0.0040138650 0.0134327369 -0.0099239288 0.0064580919 0.0068208032 -0.0025534698 0.0095558386 0.0269538387 -0.0113296380 0.0020752007 -0.0150919825 -0.0074798224 0.0095585959 0.0220852759 -0.0231819113 0.0150862257 -0.0013595482 0.0114965665 -0.0137105920 -0.0012260027 0.0022883716 0.0022698913 -0.0029112184 -0.0053120955 -0.0027443628 -0.0048238430 0.0286663478 -0.0207417229 0.0169058205 -0.0030383503 0.0143243300 -0.0010459659 0.0069231132 0.0072753815 0.0010831660 0.0027096047 -0.0031937114 0.0001375662 0.0046451955 -0.0022408665 -0.0049752759 -0.0033447162 -0.0001954421 0.0093825553 -0.0033078672 -0.0027079495 0.0030460757 -0.0036386486 -0.0001698158 0.0112232020 -0.0118450352 0.0026391778 -0.0017907665 -0.0054578164 -0.0009944661 -0.0054520945 0.0136943860 -0.0090202130 -0.0002439572 -0.0020373094 0.0023087018 -0.0004082799 0.0041459676 0.0035431969 -0.0001186355 -0.0004033662 0.0108270162 0.0010629125 -0.0004141721 0.0010704227 -0.0004032833 0.0014970948 -0.0000238599 0.0081980272 -0.0075340270 0.0016072603 -0.0071087307 0.0037753285 -0.0008885146 -0.0077338553 0.0045414283 -0.0034746362 0.0064923127 -0.0047024664 -0.0005117110 -0.0350532478 0.0517024925 -0.0141738257 0.0272403706 -0.0436654474 0.0117691347 0.0320512088 -0.0504631902 0.0051982839 -0.0276737558 0.0402644299 -0.0131897994 0.0076793923 -0.0079495096 0.0020683393 -0.0045515826 -0.0045943498 0.0001232619 -0.0085615782 0.0037717501 -0.0015724498 0.0040551995 0.0016399620 -0.0009273002 0.0007394829 0.0013444843 -0.0060398440 0.0019212955 -0.0047944988 -0.0064514154 -0.0051459905 -0.0083053167 -0.0019793493 0.0001782125 -0.0049235467 0.0005110095 0.0010131467 0.0079439863 0.0023159411 -0.0007955193 0.0084924079 -0.0014553068 0.0022385725 0.0079591286 -0.0013439082 0.0049052084 0.0050147793 0.0024985667 -0.0002635853 0.0011960510 0.0013871248 -0.0027636622 -0.0184641472 0.0100505642 -0.0035385211 0.0095479027 -0.0359459534 0.0033928199 -0.0170952875 0.0103996651 -0.0187779617 -0.0152794482 -0.0018541918 -0.0147344450 -0.0145326475 -0.0089825406 0.0333357429 -0.0026128747 0.0149103206 -0.0244705097 0.0079630078 0.0246688161 0.0019628527 -0.0150718579 -0.0008576661 0.0109167402 -0.0178176540 -0.0155624112 -0.0076478106 -0.0008507238 0.0026855377 -0.0076859822 -0.0007058892 0.0054349990 0.0049355760 -0.0056502141 -0.0110099419 0.0027842699 -0.0146699151 0.0058685750 0.0280491716 -0.0517720422 0.0317865047 0.0212913874 -0.0350161253 0.0311676839 0.0073332838 -0.0290888329 0.0144269153 -0.0276695335 0.0682046070 -0.0502470191 -0.0295107809 0.0570456602 -0.0402533296 -0.1709687298 0.3658465039 -0.1847830968 -0.1341652284 0.3463478448 -0.1792148509 -0.0143318500 0.0261226782 -0.0034018650 0.1980081045 -0.4407462562 0.2337571762 0.2072145643 -0.4269839793 0.2331857664 -0.0055604963 -0.0037152902 0.0038138711 -0.0054908469 -0.0010557676 0.0062000819 0.0072973972 0.0037655609 -0.0020233743 -0.0042866842 0.0002141471 -0.0057825503 -0.0033710313 -0.0019176847 -0.0034612093 0.0274884552 0.0363626943 -0.0162477979 0.0135624457 0.0327224081 -0.0139435817 -0.0001118304 -0.0076098582 0.0025363433 -0.0126484006 0.0058354230 -0.0021639802 0.0014606172 0.0066788096 -0.0097461171 0.0074166897 -0.0049575089 0.0044650003 0.0032319337 -0.0074076224 -0.0055932067 -0.0004771378 0.0032296699 0.0035878220 -0.0004762033 0.0010472017 -0.0048434862 -0.0039048372 0.0018062096 0.0045833124 0.0047378201 0.0065445828 0.0014781763 0.0070697420 -0.0005057523 -0.0039639795 0.0136511773 -0.0108692950 -0.0095835089 0.0005729145 0.0003869548 -0.0019840260 0.0279202951 0.0020440066 -0.0093276634 -0.0013763302 0.0111459576 0.0001069908 -0.0126730589 -0.0031018029 0.0058070210 0.0138748684 0.0078477508 -0.0016417509 -0.0092772388 0.0063972817 0.0178328005 0.0021600166 0.0103826606 0.0001573738 0.0045884531 -0.0016140843 0.0038795234 0.0022450883 0.0148597480 -0.0013645492 0.0083810844 -0.0067499307 0.0042863153 -0.0201887772 0.0176678979 -0.0020260786 0.0072877387 -0.0038092918 0.0090391627 -0.0070667451 0.0011131024 -0.0025148492 -0.0154501376 -0.0062282848 -0.0068696267 0.0015266191 -0.0002978772 -0.0086887414 -0.0170954424 0.0070569761 -0.0173403470 0.0053011775 0.0054776467 0.0062351314 0.0080007794 0.0084284098 0.0181612085 -0.0008089809 0.0014386115 0.0052964126 0.0017983895 0.0020756802 0.0059953751 -0.0072268701 -0.0033016366 0.0000584461 0.0021799969 -0.0021956839 -0.0007664512 -0.0148878815 -0.0085158701 0.0070286430 -0.0061246299 -0.0046687831 0.0051015979 -0.0714727900 -0.0097477422 0.0831814573 -0.1331610801 0.0095248410 0.0707381128 -0.1073378582 0.0069263613 0.0339109950 0.0487407354 -0.0035435986 0.0565851807 -0.0130005936 -0.0403087708 -0.0926976926 0.0003239682 0.0358457408 0.0863908522 0.0505505590 -0.0027730884 -0.0589150839 -0.0821623242 0.0215006360 -0.0302163361 -0.0513776318 0.0291961663 -0.0717533049 -0.1228921106 0.0257628309 -0.0131701592 0.0787769425 0.0421802326 -0.0669403496 0.0746238653 -0.0742994464 0.0800781448 -0.0430544942 0.0053124570 -0.0085513391 -0.0191033953 0.0317765734 0.0221373397 -0.0233951534 -0.0194391848 -0.0232832421 0.0267011646 -0.2029116374 0.1523855947 0.0837265586 -0.0201405814 0.0551314634 -0.0073399682 0.0271178849 0.0224044663 0.0060360302 0.0058199110 -0.0107994545 -0.0069032280 0.0228026613 -0.0068672159 -0.0121357357 -0.0217467546 -0.0009301286 0.0300203381 -0.0093507672 -0.0118885515 0.0121530801 -0.0137100729 -0.0004909268 0.0827837503 -0.0763437369 0.0415773655 -0.0337212177 -0.0024352129 -0.0268613577 -0.0547278930 0.0859204768 -0.0503312929 -0.0093827011 0.0265458664 -0.0095234228 0.0226400547 0.0010220229 0.0451806772 -0.0097132551 0.0615909756 0.0372944554 -0.0102127627 0.0201939327 0.0032827079 0.0063317224 -0.0037348281 0.0152820049 0.0027141719 0.0140293162 -0.0104477325 -0.0049586248 -0.0259830352 -0.0016989380 -0.0151508536 -0.0258668382 -0.0107754475 0.0117190667 0.0167515478 -0.0190868612 0.0744739979 -0.0844024286 0.0199447680 -0.0655378866 0.0387692298 -0.0289591158 -0.0693002245 0.0676998360 -0.0608705938 0.0338625146 -0.0425107581 -0.0298302404 -0.0182987055 0.0402657743 0.0038681447 -0.0200977427 -0.0079321999 -0.0021810472 0.1333971641 -0.1570391470 0.0007844727 -0.0297852868 -0.0027063256 0.0012399939 -0.0001006235 -0.0099629807 0.0266714468 -0.0054208005 0.0223908584 0.0248144282 0.0209665301 0.0349200304 0.0115386957 0.0063548100 0.0218203957 -0.0107534059 -0.0138300143 -0.0328504586 -0.0026677206 0.0003241762 -0.0412432277 0.0132167910 -0.0142412224 -0.0324982838 0.0084443362 -0.0214453993 -0.0221077353 -0.0111677103 -0.0013780093 -0.0046216059 -0.0039900823 0.0275079226 0.0509198908 0.0064509904 0.0308241719 -0.0408640669 0.1452411458 -0.0068791463 0.0770242130 -0.0734258437 0.0719816095 0.0745310593 -0.0065161604 0.0997708445 0.0687402349 0.0491317902 -0.1643581594 0.0124799005 -0.0857520575 0.1001991707 -0.0323984970 -0.1009869239 -0.0162021468 0.0720034751 0.0127064555 -0.0507135560 0.0816390211 0.0718371325 0.0301313254 0.0041867785 -0.0086106357 0.0310876246 0.0052908839 -0.0212578514 -0.0238303896 0.0247028200 0.0490147153 -0.0272419925 -0.0037091435 0.0080908841 0.0268721582 -0.0021091001 -0.0002612006 0.0352961452 0.0197666475 0.0263746738 -0.0375521334 0.0049500288 0.0039011706 0.0395734473 -0.0121794860 -0.0430991244 0.0274260089 -0.0060336547 -0.0228968187 -0.0034455482 0.0804178096 -0.0374337830 0.0496730813 0.0636876082 -0.0259369433 -0.0510736078 -0.0284209104 0.0157484690 0.1009095365 0.0509621970 -0.0381915842 0.0280390371 0.0322926879 -0.0666552324 0.0242977191 0.0015797047 -0.0099041492 0.0266149157 -0.0165178038 -0.0297008274 -0.0392288608 -0.0045474623 0.0026499627 0.0378198230 0.0042612860 0.0358710414 0.0285742885 0.0087965672 0.0175310946 -0.0512004076 -0.0992814034 0.0354655961 0.0123936836 -0.0979847321 0.0357430722 -0.0241530067 0.0381687912 -0.0132457519 0.0493715628 -0.0996690750 0.0426733569 -0.0175809250 -0.0758806315 0.0772313323 0.0266840409 0.0172053640 0.0502702458 0.0034853304 -0.0020916045 -0.0602934971 0.0104522172 -0.0221099805 -0.0369427318 0.0074076090 0.0008198075 0.0448321376 -0.0256667697 0.0106645796 0.0320956048 0.0048623522 0.0556746574 -0.0155788390 0.0555196796 0.0015690759 -0.0024197534 0.0945051793 -0.0747835886 -0.0319961490 -0.0833013795 0.0268585922 -0.1691553081 0.0894190547 0.0104251943 -0.1757718746 0.0038444531 0.0906316696 -0.0178371817 -0.0842274841 -0.0215455154 0.0169073272 0.2261313779 0.0484737259 0.1086585556 -0.0209455281 0.0044569641 0.1432293216 -0.0147662481 -0.0436299792 0.0227980446 -0.0207459633 -0.0045145099 -0.0296083171 -0.0201692953 -0.0720734450 0.0085295824 -0.0647592520 0.0421678780 -0.0136707726 0.1673896560 -0.0943420618 -0.0941562517 -0.0273911003 0.0050047910 -0.1158604509 0.0415606538 -0.0213620545 0.0014361108 0.0964618974 0.0339200190 0.0254830134 -0.0802712997 -0.0078317096 0.1421787085 0.0674777859 -0.0333936540 0.1479886210 -0.0230823158 -0.0265255690 -0.0277646755 -0.0451427960 -0.0311392068 -0.0907813053 0.0109606910 0.0115421610 -0.0070547992 -0.0169371523 -0.0066066609 -0.0465924198 0.0313106250 0.0130552265 -0.0029139171 -0.0183800672 0.0148791521 0.0084165782 0.0472698309 0.0343075188 -0.0221980235 0.0393561293 0.0291973827 -0.0230915079 0.0058550879 0.0013433329 -0.0029972563 -0.0005538405 -0.0062619261 0.0011349180 0.0012575371 -0.0064825851 -0.0016100722 -0.0007114668 0.0048352916 0.0007616192 0.0002713496 0.0063214000 0.0019044326 -0.0050799790 -0.0029017595 -0.0018904534 -0.0044107566 0.0013603090 -0.0014359449 0.0067912628 0.0094770298 -0.0014914963 0.0077309418 -0.0036112618 0.0006722993 -0.0085489671 0.0091280740 0.0255404329 -0.0081859063 -0.0052468338 0.0064458220 -0.0043557394 0.0039254720 -0.0031845053 0.0034926293 0.0015827027 -0.0011823875 0.0023833744 -0.0045697701 -0.0024877943 0.0015861163 0.0025468095 0.0022622910 0.0059482884 -0.0357515055 0.0219120231 -0.0062712869 -0.0048913570 -0.0059934156 0.0002726387 -0.0048639234 -0.0059876131 -0.0016713168 -0.0014320450 0.0017986264 -0.0021964478 -0.0027107286 0.0022062802 0.0037773200 0.0055935780 0.0001202062 -0.0038188488 0.0001035280 0.0044136760 -0.0010807518 0.0010796051 0.0017228151 -0.0055024974 0.0065011765 0.0019367326 0.0055614665 0.0038265492 0.0045043833 -0.0016659929 -0.0094500359 0.0033780842 -0.0004595338 0.0022583765 -0.0049325929 -0.0002889232 -0.0056874949 -0.0000840175 0.0022389758 -0.0106912811 0.0008195314 -0.0026100884 0.0037402736 -0.0007507128 -0.0007282941 0.0013468618 -0.0025748766 0.0114370294 -0.0167096089 0.0049774604 -0.0067129620 0.0109384468 -0.0011642470 -0.0110715059 0.0179002986 -0.0032209893 0.0084984339 -0.0118792040 0.0030942016 -0.0692359456 0.0942883117 -0.0255452292 0.0635254609 -0.0838815172 0.0237443246 0.0719038071 -0.1044557153 0.0304766538 -0.0585523820 0.0861244936 -0.0160038474 0.0117244799 -0.0185522654 0.0020157087 0.0037583232 0.0032690469 -0.0009258644 -0.0019020971 0.0047610357 0.0012622821 -0.0033749729 -0.0128816459 0.0065723447 0.0023464324 -0.0039751896 0.0000606336 -0.0032928680 0.0052575338 -0.0025727566 -0.0090017981 -0.0106631661 0.0099645960 0.0622439847 0.0032460352 -0.0973333303 -0.0781912973 -0.0070004223 0.0570948389 -0.0656217496 -0.0060411208 0.1091223846 -0.0109669575 0.0065977424 0.0639228882 0.0058534476 0.0024906991 -0.0000728928 -0.0019271902 0.0007573417 0.0017423148 0.1279710167 -0.1740842881 0.3691854573 0.1358824787 -0.0210047338 0.0252602742 0.0526622926 0.0397342140 -0.2304052324 -0.3371431390 0.0191373699 -0.3346849026 0.5002026322 -0.0019272544 0.1106808922 0.0101749349 -0.0273519095 -0.2191099403 -0.0964239136 0.0457419861 0.0038054935 0.0391888620 0.0143504010 -0.0720526057 -0.1996414646 0.1131956768 0.1212239470 -0.0003946019 0.0009253838 0.0040810646 -0.0023705037 0.0053194788 0.0020643832 0.0038393784 -0.0067756938 -0.0078729802 0.0017137328 -0.0001385192 -0.0001558636 -0.0014965515 -0.0007642166 -0.0020508013 -0.0029006945 -0.0017869632 -0.0029744963 0.0022601390 0.0003322672 -0.0004827213 -0.0016636342 0.0005017760 0.0041578979 -0.0004357474 0.0006123244 0.0025445248 0.0014662044 -0.0064747805 0.0007626943 -0.0044099414 -0.0070220641 0.0029761025 0.0012998241 0.0002347439 -0.0002271575 -0.0090134353 0.0009782772 0.0008126510 -0.0015466051 0.0042886883 0.0003039932 0.0015179219 0.0063996535 -0.0105333807 0.0006701903 0.0057119655 -0.0029503431 -0.0024554347 -0.0060254899 0.0032264761 0.0003195079 0.0063013045 -0.0019616506 0.0017773536 0.0120105213 0.0006711350 -0.0361861809 -0.0300918792 0.0115056548 -0.0251334728 -0.0352663068 0.0202061444 0.0106141561 -0.0083541145 0.0014054485 -0.0269020600 -0.0341652586 0.0172356253 -0.0355600715 -0.0270382613 0.0182693969 -0.0010765950 -0.0001016562 -0.0017607991 -0.0002476866 0.0003284337 0.0019381153 -0.0028968080 0.0055130537 0.0100412616 -0.0010888269 0.0005362973 -0.0110570732 -0.0003457694 -0.0018005767 -0.0008477664 -0.0005011987 0.0010850502 0.0010560484 -0.0006946017 -0.0011222588 0.0009928030 -0.0018342090 0.0017099784 0.0015387088 -0.0004255866 -0.0012271396 -0.0035108692 -0.0042728165 0.0006308588 -0.0003121679 0.0006881553 -0.0000975623 -0.0011356018 0.0020348570 0.0001574761 -0.0014190963 0.0028523349 -0.0003651540 0.0008247277 0.0038482871 -0.0034856579 -0.0007292689 -0.0022579895 -0.0020387503 -0.0005171005 -0.0009372010 0.0004298985 0.0016926858 0.0023778924 -0.0039688675 -0.0002108858 0.0029839130 0.0000535870 -0.0016975921 -0.0034033647 -0.0033023860 0.0149886086 -0.0036953480 0.0056177695 0.0158659751 -0.0014112828 -0.0008968970 0.0009180881 -0.0010204327 0.0011634644 0.0004208363 0.0051835280 -0.0014983981 -0.0130880988 -0.0015136040 0.0041030101 -0.0015540726 0.0028172894 0.0026076341 0.0012725922 0.0053178339 0.0057674370 0.0137547259 -0.0053775640 -0.0038708281 -0.0014156476 -0.0035522622 -0.0037320749 0.0003117653 -0.0056411136 0.0048016289 -0.0024368568 0.0174443493 0.0004598949 -0.0130837223 -0.0020502080 -0.0198660135 0.0100409872 0.0051196086 0.0044765837 0.0162911517 0.0132981788 -0.0005614772 -0.0237024213 0.0746570567 0.0114387143 0.0036973134 0.0387423683 0.0190448992 -0.0181285453 -0.0188600515 -0.0065732549 -0.0057564740 -0.0072240188 0.0039063086 0.0307498036 -0.0075603378 0.0020542042 -0.0209394176 -0.0140322959 0.0085680932 0.0052225390 0.0168569612 -0.0266694904 0.0111788842 0.0049149794 -0.0022742816 0.0159494125 0.0453816005 -0.0281521539 -0.0178354266 -0.0106840413 -0.0081641198 0.0185316629 -0.0197263963 0.0203964823 -0.0325818155 0.0151560647 -0.0026763098 0.0075957100 0.0039485495 -0.0091040517 -0.0076959158 0.0009352781 0.0153162615 0.0114809514 0.0085955090 -0.1384597020 0.1344498563 0.2536455391 0.0214469197 0.1850644072 -0.0170778899 0.1170693772 0.1178599648 0.0321936244 0.0269257579 -0.0443708446 0.0024428989 0.0818118609 -0.0293250035 -0.0592499957 -0.1031378254 -0.0005106378 0.1116842228 -0.0114826410 -0.0799024446 0.0327224760 -0.0508304073 -0.0160233268 0.2396540122 -0.2264697905 0.0872709485 -0.1434751847 -0.0269507184 -0.1081240862 -0.0880894272 0.3010487205 -0.1450768921 -0.0246451920 0.0306718017 0.0190521659 0.0308832391 0.0405176320 0.1051284072 -0.0397218539 0.1460698617 0.1347171875 -0.0021506360 0.0116835733 0.0230089781 0.0097603248 0.0034899479 0.0419959319 0.0034608673 0.0282390461 -0.0294936863 -0.0304541663 -0.0429853755 -0.0119570938 -0.0452877871 -0.0666847932 -0.0307279197 0.0425023629 0.0365796689 -0.0526133295 0.1194689076 -0.1359447485 0.0320550093 -0.1050807806 0.0530390966 -0.0382103959 -0.1128017654 0.0825738511 -0.1553935777 0.0786049918 -0.0879782035 -0.0878226095 -0.0262811688 0.0684193210 0.0244424975 -0.0844638537 -0.0665158490 -0.0176473725 0.1981061196 -0.3023140901 -0.0171218418 0.0132290351 0.0088423969 -0.0045644294 0.0001017359 -0.0120391280 0.0288972708 -0.0037199877 0.0188117307 0.0172005945 0.0205012449 0.0373471250 0.0131233555 -0.0068966385 0.0007173556 -0.0174677542 0.0016823078 -0.0129570278 0.0050515723 0.0006172923 -0.0104091752 0.0167786279 0.0048306787 -0.0134143654 0.0158410653 -0.0196705130 -0.0204963163 -0.0100351744 -0.0008489796 -0.0041296257 -0.0036730103 0.0018984852 0.0143269526 -0.0060129379 0.0032579849 -0.0155190611 0.0528500133 -0.0046639512 0.0082275229 0.0085362706 -0.0036422141 0.0221361420 -0.0278456906 0.0871739539 0.0202411366 0.0276700386 -0.0238348435 -0.0014442386 -0.0341668989 0.0094126193 -0.0003203134 -0.0438976170 0.0299444616 0.0049094822 -0.0471446302 -0.0704952231 0.0457094187 0.0466585421 0.0264082310 0.0035880952 -0.0073701369 0.0267365983 0.0036117751 -0.0184610781 -0.0215437997 0.0228961082 0.0444621267 0.0091446963 -0.0068878732 0.0027937435 -0.0065503365 0.0117061175 -0.0124611272 -0.0065031035 -0.0028859687 -0.0109388295 0.0125931636 -0.0143021890 0.0064916287 -0.0120329385 0.0103697778 0.0107438140 -0.0074239120 0.0121099593 0.0062438432 0.0453041682 -0.0811845705 0.0379917399 -0.0030594695 -0.0428674015 0.0214385150 -0.0043707561 0.0177248067 -0.0040406610 -0.0105644177 -0.0429227291 0.0309314549 0.0196656815 -0.0476722596 0.0437918363 -0.0120314868 -0.0119478931 0.0026911199 -0.0079800945 -0.0056460209 0.0056807223 0.0154992315 0.0141735541 -0.0074385322 -0.0101704768 -0.0047614429 -0.0012360541 -0.0118915974 -0.0076712602 0.0041358606 0.0536595591 0.0747099002 -0.0382693381 0.0334990093 0.0553830258 -0.0273761169 -0.0012325914 -0.0211460391 0.0065508138 0.0177481035 0.0495824396 -0.0224110085 0.0363890861 0.0651444204 -0.0397202982 0.0007011171 -0.0052486617 -0.0010168175 -0.0006868299 -0.0051660923 0.0030349972 0.0001728030 0.0080698153 0.0083680285 -0.0000486189 0.0031915353 -0.0110800911 0.0145045861 -0.0043252593 -0.0088252780 -0.0071400152 -0.0239956747 0.0017335598 -0.0194608704 -0.0086208699 0.0043997531 -0.0354369066 0.0315668033 0.0190106270 0.0141011850 -0.0147899006 0.0204169839 -0.0456985674 0.0014352347 0.0519320255 -0.0038466557 -0.0398680545 0.0037289724 0.0346389987 0.0124203391 -0.0156377147 -0.0689104307 -0.0262557638 0.0005054224 0.0274432105 0.0006414376 -0.0352365572 0.0012764687 0.0180081616 -0.0026335465 0.0103209609 0.0011176200 0.0060291995 0.0063373326 0.0282555855 -0.0011717618 0.0218676121 -0.0180318769 0.0116597312 -0.0415017130 0.0335628860 0.0003134712 0.0219472981 -0.0091233383 0.0223171700 -0.0099246302 0.0136961111 -0.0022844269 -0.0313457927 -0.0136035244 -0.0128816438 0.0174117438 0.0104103075 -0.0134359112 -0.0285513571 0.0073780604 -0.0390788433 -0.0257623958 -0.0315955863 -0.0292476953 -0.0602749341 -0.0302314952 -0.1136796930 0.0225136744 0.0363046298 0.0143629757 -0.0240333061 -0.0016707215 -0.0667567505 0.0308271275 0.0119401737 -0.0004528069 -0.0375564263 0.0128460429 0.0139937795 0.0502566526 0.0376730546 -0.0246332746 0.0470759447 0.0372470224 -0.0235879575 0.0006832364 -0.0003915308 0.0045806250 -0.0212145324 -0.0074511961 -0.0170961010 -0.0071292284 -0.0108739297 0.0045873459 0.0060015466 0.0040354368 -0.0012418751 0.0050825674 0.0013772746 -0.0070038984 0.0042736424 -0.0033891259 0.0088967256 0.0064904442 -0.0040721783 0.0010311593 -0.0036476484 0.0119621220 -0.0044340808 0.0009190855 -0.0001496322 -0.0056026870 -0.0181469256 0.0121659054 0.0167314862 0.0026015049 0.0030196890 -0.0088610801 -0.0014031517 0.0001920369 0.0067226959 -0.0032264917 -0.0011558326 0.0024848649 -0.0010118124 0.0054382078 0.0025514035 -0.0009337709 -0.0082907449 -0.0033156256 -0.0341524227 0.2186506917 -0.1286225109 0.0406900515 0.0752373150 0.0465466571 0.0012436331 0.0479145455 0.0648580037 0.0188005827 0.0131456663 -0.0131426095 0.0290463191 0.0224076560 -0.0172224348 -0.0420204110 -0.0542859085 -0.0039733109 0.0313155736 0.0056851698 -0.0495528578 0.0054672080 -0.0116522039 -0.0189819537 0.0108423249 -0.0265881487 -0.0455286271 -0.0300444168 -0.0611506525 -0.0330670416 0.0547405693 0.0621140462 -0.0158887301 0.0034356921 -0.0020969156 0.0386790218 -0.0096700383 0.0252342202 0.0263119026 0.0140760383 -0.0514139083 0.0961600470 0.0072079195 -0.0052995359 0.0113551053 -0.0132305457 0.0218529926 0.0019031473 0.0539113044 -0.0498674113 0.0075422053 -0.0422610888 0.0234655399 -0.0104478919 -0.0503487706 0.0354127983 -0.0241420652 0.0422286016 -0.0317380235 -0.0067433000 -0.2460795897 0.3668623815 -0.1093534031 0.1633913418 -0.2766759776 0.0538292205 0.2440245902 -0.3740707609 0.0503123642 -0.1677795759 0.2377445429 -0.0896409984 0.0855748687 -0.1193113767 0.0347508784 -0.0300409313 -0.0369541484 0.0023831352 -0.0854424285 0.0178320419 -0.0066688891 -0.0073062194 -0.0050622207 0.0027052539 -0.0009807326 0.0072455200 -0.0160788124 0.0059344235 -0.0129291619 -0.0065650483 -0.0129256129 -0.0153676319 -0.0107466987 0.0336659220 -0.0127788629 0.0394750753 -0.0277036724 0.0214564602 -0.0138957263 -0.0156856710 0.0089917059 -0.0341509113 -0.0296634042 0.0205131378 -0.0414816196 0.0083733171 0.0105380469 0.0047042467 -0.0001441296 0.0015456637 0.0011927105 0.0283970716 -0.0418392503 0.0748184570 0.0344338477 0.0222638116 -0.0877346161 0.0203950615 0.0340144670 -0.1253898244 0.0026174724 -0.0294953472 0.0391177770 -0.1508421201 -0.0284305254 -0.0481415197 -0.0180508599 0.0067468487 0.0350561116 0.0324692870 -0.0211566591 0.0774269898 -0.1166639698 0.0407602962 0.1721443968 0.1780316579 -0.0826939784 -0.0910261009 -0.0138165787 -0.0021258494 0.0055245338 -0.0133727088 0.0005639695 0.0092984858 0.0105182396 -0.0127254018 -0.0209114251 -0.0054118442 0.0044719090 -0.0022369695 -0.0002184591 0.0010598661 -0.0054350013 -0.0000499017 0.0010622487 -0.0028209233 -0.0050955080 0.0109998627 -0.0062907484 0.0084129647 -0.0126786380 0.0083374004 0.0093486894 -0.0095766627 0.0093352379 0.0117825963 -0.0194213968 0.0060532442 0.0090633873 -0.0256090783 0.0131190604 -0.0033453616 -0.0128388465 0.0030878423 -0.0348720926 0.0814891132 -0.0446431898 -0.0341907963 0.0906680969 -0.0518659423 0.0074765485 0.0083275782 0.0014537014 0.0036948201 0.0058229001 -0.0000604729 -0.0066299603 -0.0076235010 0.0040357485 0.0032871672 0.0009658870 -0.0028198230 0.0057210921 0.0013925570 -0.0057514816 -0.0288186246 -0.0435173854 0.0247533312 -0.0254194518 -0.0306231957 0.0175924208 -0.0019994714 0.0123036326 -0.0043071543 -0.0123809032 -0.0184977960 0.0075765141 -0.0135917587 -0.0313981255 0.0148888938 0.0004151771 0.0046801432 0.0056511213 0.0000730597 0.0028077358 -0.0059462896 0.0000854197 -0.0054277376 -0.0061273222 0.0001412432 -0.0011618329 0.0080551934 -0.0033744557 0.0012465682 0.0019181308 0.0018053598 0.0061923350 -0.0012937029 0.0037733437 0.0042001693 -0.0021891724 0.0077911865 -0.0078135821 -0.0053542163 0.0006142387 0.0048629914 0.0061035535 0.0120584227 -0.0015435207 -0.0089424449 0.0015680184 0.0098537282 0.0006916686 -0.0086635043 -0.0039535450 0.0060700374 0.0107870894 0.0074512083 -0.0105175287 -0.0133769729 -0.0004200304 0.0000034225 0.0006579785 -0.0062932989 0.0013639969 -0.0038085578 -0.0009235417 -0.0016206602 -0.0026760168 -0.0095424448 -0.0006473147 -0.0084941999 0.0076225309 -0.0062082221 0.0097767619 -0.0107549236 0.0057804676 -0.0131042135 0.0041095244 -0.0036381568 0.0023028778 -0.0070306156 0.0012448761 0.0109978839 0.0050612584 0.0053523739 -0.0049655669 -0.0061381473 -0.0031793683 0.0111347827 -0.0020850219 0.0120398675 0.0101745462 0.0137696431 0.0104207742 0.0232578599 0.0159967891 0.0463032648 -0.0076644606 -0.0061645644 -0.0006047149 0.0068880285 0.0011264833 0.0228567287 -0.0137889578 -0.0032075875 -0.0004119536 0.0237074723 -0.0091190602 -0.0132749158 -0.0270839359 -0.0141518654 0.0129827822 -0.0200761388 -0.0184240261 0.0185401425 -0.0287736967 -0.0086743878 -0.0027108612 0.1031277876 0.0466712748 0.0749554305 0.0185325869 0.0666010679 -0.0166770807 -0.0082726675 -0.0247048692 -0.0031478666 -0.0074201964 -0.0315594741 0.0128866906 0.0119288437 0.0320367634 -0.0078992386 0.0058914810 0.0156003446 0.0061283596 -0.0276188000 -0.0704606865 0.0126546428 -0.0415304922 0.0203597980 -0.0000320363 0.0760178842 -0.0699734163 -0.1499585919 0.0421458887 0.0203825654 -0.0101661087 0.0184556812 -0.0125157011 -0.0013103213 -0.0164139447 -0.0057608875 0.0067107659 -0.0051380215 0.0130151619 0.0063475482 -0.0075290600 -0.0053346643 -0.0101977604 0.0347914918 -0.2160138507 0.1175253625 -0.0192397048 -0.0721670306 -0.0286019085 -0.0037301997 -0.0366074457 -0.0525716757 -0.0145357315 -0.0111548354 0.0093308317 -0.0268323417 -0.0146448440 0.0110468688 0.0350066546 0.0412885599 0.0043083480 -0.0204794088 -0.0053023087 0.0390907843 -0.0008586797 0.0085201733 0.0160542565 0.0134349874 -0.0010293097 0.0480805345 0.0117878129 0.0579525968 0.0229891975 -0.0615579071 -0.0312492697 0.0001134966 -0.0062951554 0.0060290782 -0.0324316507 0.0157207497 -0.0186942688 -0.0092640135 -0.0030628014 0.0377014799 -0.0545985174 -0.0109742664 0.0173198763 -0.0080269806 0.0002865326 -0.0023240177 -0.0035288378 0.0114447922 -0.0216308646 0.0089985959 -0.0022057055 0.0130116310 -0.0007732834 -0.0048756456 0.0249487294 0.0010419277 0.0020752138 -0.0177279223 0.0114682240 -0.0739897438 0.0975539029 -0.0275009076 0.0753416041 -0.1107541039 0.0154230400 0.0768047045 -0.0996691066 0.0434092911 -0.0815334264 0.1093403422 -0.0087740930 0.0054801700 -0.0095676452 -0.0016031329 0.0228743685 0.0301250205 0.0004467767 0.0745609832 -0.0195394335 0.0051700254 0.0213876590 0.0520457602 -0.0261757671 -0.0067514889 -0.0072645957 0.0469973773 -0.0136697466 0.0244477978 0.0422111975 0.0315014123 0.0652090637 0.0114397745 0.0416705060 -0.0455187891 0.0226518472 -0.0435915947 0.0307036399 -0.0039550444 -0.0284223127 0.0136131160 -0.0169448680 -0.0343858470 0.0262825820 -0.0349363111 -0.0291244499 -0.0305513536 -0.0172689435 0.0009451678 -0.0083688755 -0.0106218370 0.0481028946 -0.1032514941 0.1570374773 0.0589824946 0.0301034190 -0.1331775306 0.0370475633 0.0310296443 -0.1775907674 -0.0718537396 -0.0387619290 -0.0213134817 -0.0738376071 -0.0386783071 -0.0354193907 0.0235753458 -0.0058777384 0.0119559197 0.0036865441 -0.0130339521 0.1004771442 -0.1256821714 0.0408473226 0.1839381486 0.1598258233 -0.0795673841 -0.0845812068 0.0516392368 0.0047402394 -0.0204891123 0.0559311449 0.0049636004 -0.0400262021 -0.0309303585 0.0339890078 0.0705104848 0.0020178095 -0.0283416256 0.0174181978 -0.0030339827 0.0330760881 -0.0281989837 0.0033084421 0.0255330491 -0.0119065256 0.0051886313 -0.0420695328 0.0253578773 0.0014792317 0.0132917260 -0.0096583254 0.0010972960 0.0255533477 -0.0049266514 0.1254063594 -0.1898456013 0.0970877181 0.0819757422 -0.1355043381 0.0653738178 -0.0406640641 0.0310293541 0.0004420174 0.0455691966 -0.0644085833 0.0389303419 0.0716022183 -0.0980053284 0.0564498448 -0.0141463584 -0.0408896613 0.0293269924 -0.0050446619 -0.0376000350 0.0088562079 0.0243173189 0.0595929969 -0.0308615044 -0.0049602479 -0.0281008679 0.0204712798 -0.0163257187 -0.0447211354 0.0164604203 0.1891266267 0.1860700991 -0.0940993701 0.1497403156 0.1474569889 -0.0746008441 -0.0639875724 -0.0311256888 0.0078262503 0.1399458551 0.1365035164 -0.0762291033 0.1754907782 0.1839248547 -0.0986891694 0.0188876041 -0.0017560707 0.0257904728 0.0003734770 -0.0138004526 -0.0305458329 0.0193751108 -0.0038574986 -0.0347344738 0.0118018161 0.0192724822 0.0350283478 0.0150101989 0.0020234669 -0.0025798985 -0.0017680495 -0.0290144012 0.0001409980 -0.0094726451 -0.0115126441 0.0062620977 -0.0205495575 0.0237076980 0.0150524531 -0.0094640666 -0.0114129087 -0.0285800854 -0.0274739928 0.0090465003 0.0282550408 -0.0135257811 -0.0396487158 0.0016392672 0.0184289195 0.0140275260 -0.0178075879 -0.0449574888 -0.0317126528 0.0537466110 0.0390381085 0.0188532954 0.0232989301 0.0107788659 0.0207393616 -0.0026015958 0.0084716049 -0.0032985569 -0.0030293005 -0.0061396086 0.0327691897 0.0029333160 0.0010546255 -0.0134207181 0.0173835918 -0.0037397645 0.0321410009 -0.0744490812 0.0376401037 -0.0341047652 -0.0660338218 0.0033667432 0.0142499363 -0.0064350429 -0.0117566570 -0.0119584698 -0.0091319694 -0.0157097307 0.0156211824 0.0620819776 -0.0105355713 -0.0120335694 -0.0112156237 -0.0399385686 -0.0403510009 -0.0406510610 -0.0655050662 -0.0648821421 -0.1491977339 0.0182784728 0.0013103648 -0.0277641273 -0.0068791497 -0.0043922766 -0.0433005334 0.0470120499 0.0261586049 0.0012113092 -0.0148505565 0.0006736303 -0.0103189807 0.1105556839 0.0616700427 -0.0520680742 0.0363212953 0.0259140924 -0.0207740772 -0.0093988962 -0.0038285303 -0.0053669106 0.0642311169 0.0180798531 0.0518171810 0.0126991933 0.0306620094 -0.0129308573 -0.0055882556 -0.0069924071 -0.0007631464 -0.0031238137 -0.0104517952 0.0109657542 -0.0030397621 0.0152164542 -0.0050362754 -0.0033409314 0.0120115659 -0.0010627702 -0.0062928343 -0.0270489962 0.0038845592 -0.0124577945 0.0062032458 -0.0002421302 0.0244438951 -0.0273132728 -0.0414421783 0.0153357275 0.0044538359 0.0007895074 0.0035224482 -0.0025494106 -0.0073301378 -0.0044471912 -0.0037696406 0.0022372108 -0.0029641554 0.0005395439 -0.0010685274 0.0000928879 0.0071576547 0.0015406141 0.0298187422 -0.2229167987 0.0955699674 0.0720415973 -0.1221340104 0.0349133007 -0.0153592702 -0.0137408812 -0.0394124768 -0.0179995868 -0.0037826293 -0.0042302472 -0.0448636202 0.0107123821 0.0029064282 0.0361011935 0.0293279011 0.0089972581 0.0142355619 -0.0138312181 0.0343366399 0.0144568780 -0.0107060673 0.0212684990 0.1263386349 -0.1021937299 0.1151638798 -0.0433099686 0.0932640320 -0.0035855283 -0.1444139670 0.0749187382 -0.0625775271 -0.0149270520 -0.0007673149 -0.0358940971 0.0263400011 -0.0057051476 0.0228896050 -0.0074777136 0.0577783358 0.0132377628 -0.0124587555 0.0223142143 -0.0024953835 0.0018634261 0.0014033154 0.0047765442 0.0202773057 -0.0254604266 0.0052666820 -0.0165006052 0.0046203315 -0.0031703816 -0.0228324943 0.0158063653 -0.0099627764 0.0166991251 -0.0141045655 -0.0006748505 -0.0847550962 0.1199896467 -0.0347567911 0.0713693431 -0.1399950217 0.0141887963 0.0862148231 -0.1339501146 0.0134305870 -0.0915921007 0.1305024779 -0.0393992369 0.0137194115 -0.0102722672 0.0074537424 0.0091382960 0.0222868510 -0.0043578213 0.0945127406 -0.0515105029 -0.0029050374 0.0082510064 0.0097995432 -0.0053239857 0.0217520272 -0.0022421331 -0.0691354714 0.0340887681 -0.0288484741 -0.0644206498 -0.0466303452 -0.0872853278 -0.0134613150 -0.0044102486 0.0873913488 0.0078730147 0.0077894118 -0.0609461385 -0.0166997629 0.0162839397 -0.0643760355 -0.0036408070 -0.0068123805 -0.0536605791 0.0051304885 0.0300650669 0.0351678869 0.0204566899 -0.0110428422 0.0122736196 0.0224876155 0.0072417658 0.1592373906 -0.1157657230 0.0043355439 -0.0701670206 0.2772178883 -0.0356696615 0.1109452328 -0.0123418831 0.2007197443 0.1201299313 0.0681079229 0.0430114424 0.1122457878 0.0533899480 -0.2869076345 0.0353883390 -0.0860182911 0.1699365111 -0.0520628461 -0.1748961713 0.0085222172 0.0864560315 -0.0245862000 -0.0558845501 0.1088230999 0.0922035977 -0.0761259482 -0.0032891625 0.0422629444 -0.0825982706 0.0016661598 0.0624084443 0.0279500815 -0.0414060319 -0.0765782441 0.0020094117 -0.0166549251 0.0101737674 -0.0017305235 0.0171261135 -0.0233865544 -0.0006165907 0.0099878689 -0.0119051336 0.0044610106 -0.0228540078 0.0134563542 -0.0004211141 0.0096311552 0.0018006040 0.0021954221 0.0184448576 0.0033333267 0.0798195492 -0.1180079873 0.0535099327 0.0371711136 -0.0838395998 0.0394259399 -0.0288441859 0.0144745920 0.0014467184 0.0158781180 -0.0359502355 0.0263117182 0.0442303033 -0.0489343965 0.0345893161 -0.0086777317 -0.0147324582 -0.0039235810 -0.0004326161 -0.0114958008 -0.0054816306 0.0054328061 0.0142597984 -0.0075027943 -0.0008455300 -0.0030629464 0.0120878364 -0.0077520649 -0.0036632770 0.0141627499 0.0410521142 0.0547422854 -0.0361218352 0.0441172064 0.0308869682 -0.0206552506 -0.0017369913 -0.0175120864 0.0038339475 0.0419429402 0.0287634241 -0.0139060380 0.0337199540 0.0602612237 -0.0232919156 0.0124689451 0.0009091831 0.0195614583 0.0000109118 -0.0078568235 -0.0225876209 0.0019155552 0.0055856891 0.0043498980 0.0015007052 0.0038429504 -0.0055672624 0.0082047057 -0.0011655362 -0.0039052154 -0.0011265803 -0.0155711187 0.0029118672 -0.0056464952 -0.0091223663 0.0066830275 -0.0144234587 0.0166304371 0.0120016593 -0.0110088976 -0.0080798758 -0.0310029757 -0.0247649245 0.0073809371 0.0115761327 -0.0082208283 -0.0239092135 -0.0020562408 0.0130445150 0.0086993640 -0.0138210702 -0.0172580266 -0.0205901454 0.0417067259 0.0333846929 0.0058611510 0.0209847755 0.0014683282 0.0086653737 -0.0011289958 0.0037830017 -0.0010885919 -0.0000483498 0.0005601223 0.0120611886 0.0008887416 0.0055627304 -0.0079498794 0.0072585356 -0.0079264563 0.0128009736 -0.0183825416 0.0144676039 -0.0107977258 -0.0100766714 -0.0001168369 0.0075645824 -0.0016103612 -0.0078720654 -0.0048769640 -0.0045093882 0.0002587989 0.0074036836 0.0140731240 -0.0075653004 -0.0008971333 -0.0087789419 0.0631413798 0.0507578881 0.0610143671 0.0749948822 0.1110778667 0.2015000708 -0.0108979874 0.0327545917 0.0793454569 -0.0119829906 0.0064194186 0.0163960548 -0.0722606736 -0.0444013592 -0.0111912302 -0.0154325079 0.0214076526 0.0394776557 -0.2090833674 -0.1051996293 0.0966293157 -0.0090574433 -0.0070713035 0.0319804247 0.0219852784 0.0062274751 -0.0115242799 -0.0378482160 -0.0370234220 -0.0304462160 -0.0023661693 -0.0448847658 0.0031858776 -0.0035284847 0.0202196949 -0.0029546977 0.0048042939 0.0264392823 0.0114635135 -0.0174676731 -0.0274627318 0.0078769590 -0.0051766825 -0.0068644599 -0.0086427707 0.0392784126 0.0435318652 -0.0072906920 0.0445899340 -0.0191952882 0.0027427811 -0.0537684326 0.0404333277 0.1676625792 -0.0355263166 -0.0187517525 0.0076864920 -0.0270642706 0.0224449367 -0.0228939210 0.0165534645 -0.0030002605 0.0039486948 0.0051944854 -0.0125819787 -0.0102162933 0.0083722229 0.0218852173 0.0088390849 0.0575438490 -0.3975616315 0.2033085195 0.0979665465 -0.1781613571 0.0410122528 -0.0201852528 -0.0248937311 -0.0642112009 -0.0255891090 -0.0069810982 -0.0046030840 -0.0679963279 0.0116202147 0.0079278543 0.0562715245 0.0484067659 0.0128726771 0.0168189511 -0.0219196632 0.0552626026 0.0191798245 -0.0135246954 0.0335984642 0.1756475690 -0.1374108785 0.1712302918 -0.0591014185 0.1412702479 -0.0034715059 -0.2093827141 0.0949009430 -0.0848681828 -0.0234307485 0.0043819590 -0.0581607653 0.0397860838 -0.0141194966 0.0189118819 -0.0262318652 0.1308054117 -0.0414524477 -0.0169728147 0.0282922216 -0.0052295582 0.0075777594 -0.0061252694 0.0115018381 0.0037492300 -0.0141883269 0.0012225180 -0.0096262389 0.0042090881 -0.0051124945 -0.0138294771 0.0055955379 -0.0048172914 0.0117238098 -0.0092996460 0.0004873537 -0.0286246013 0.0285156593 -0.0070727008 0.0570843545 -0.1091781062 0.0029831984 0.0305904511 -0.0507127453 -0.0032181570 -0.0693130096 0.0991256509 -0.0281430332 -0.0232668155 0.0432798120 -0.0003175616 0.0129783732 0.0341929560 -0.0103695959 0.1779015828 -0.1000524773 -0.0037795650 -0.0216403446 -0.0486544506 0.0249899542 0.0026326486 -0.0110845064 0.0260176937 0.0002294330 0.0146775344 0.0169200829 0.0179369161 0.0406065321 0.0078691334 0.0228603361 -0.0195577965 0.0345976670 -0.0208214375 0.0111901458 -0.0166294023 -0.0107361200 0.0026500271 -0.0293986588 -0.0256387151 0.0075464333 -0.0346569172 -0.0212364510 -0.0207281044 -0.0111765160 -0.0039510230 -0.0039295286 -0.0014892832 0.0180481524 -0.0106609929 0.0340371939 0.0272226164 0.0109813588 -0.0475437523 0.0116777493 0.0370895038 -0.1029791356 0.0150181678 -0.0198322293 0.0362397440 -0.1248706600 -0.0158804798 -0.0366972761 -0.0267086088 0.0047406410 0.0276364138 0.0525564252 -0.0275750655 0.0388774290 -0.0987971121 0.0464201706 0.1444444987 0.1371510658 -0.0537498865 -0.0620113598 0.0252648090 0.0041635845 -0.0050004211 0.0272019529 0.0045729267 -0.0178352976 -0.0246791720 0.0228346624 0.0497062760 0.0025257984 0.0103589668 -0.0065753158 0.0045827977 -0.0215663794 0.0003756233 -0.0054995345 -0.0196490613 -0.0052673862 0.0018671110 0.0131936820 -0.0086901859 -0.0066210368 0.0043444187 0.0149243526 0.0003645341 0.0005931401 0.0119996161 -0.0471097410 0.0904805509 -0.0583592505 -0.0584069172 0.0654875162 -0.0375701309 0.0034579924 -0.0107641495 0.0019954570 -0.0254270204 -0.0017485348 0.0091076958 -0.0098694295 0.0243235567 -0.0007874599 0.0160721373 0.0406086519 -0.0202167318 0.0042534566 0.0392994349 -0.0022296559 -0.0179424734 -0.0518671319 0.0271523520 -0.0001807418 0.0206262808 -0.0245391950 0.0132712060 0.0322872169 -0.0222076272 -0.1676125244 -0.1752451453 0.0929682629 -0.1532553062 -0.1406150100 0.0757592246 0.0488322228 0.0313074057 -0.0088744609 -0.1264237756 -0.0996118296 0.0566071125 -0.1353055876 -0.1469560883 0.0680470173 -0.0028729292 0.0023296228 -0.0013244037 -0.0000610040 0.0028602803 0.0022637027 -0.0162470695 -0.0000827505 0.0255781804 -0.0099399555 -0.0161354500 -0.0245616770 -0.0060571478 -0.0036809492 0.0004992770 -0.0015647569 0.0148643342 0.0026349231 0.0000463366 0.0040038607 -0.0045059034 0.0027242467 -0.0071932001 -0.0054751816 0.0149280130 0.0009708128 0.0295007161 0.0083045699 -0.0076609910 0.0032675250 0.0102399897 0.0170142682 -0.0006034328 -0.0002746156 -0.0058933193 0.0067446450 0.0103629474 0.0160171328 -0.0428917751 -0.0162750725 -0.0157645508 -0.0290189001 -0.0102328985 -0.0050846951 0.0080565680 0.0011434354 0.0014131679 0.0060733807 0.0089515210 -0.0081373840 -0.0069021852 0.0113838578 0.0018933861 -0.0112568268 -0.0300571914 -0.0031317951 0.0698521637 -0.0329814607 0.0246794403 0.0858878313 -0.0111024398 -0.0066594490 0.0050209813 -0.0094674472 0.0014791687 -0.0010529346 0.0244426428 -0.0102080954 -0.0719375472 -0.0117904198 0.0152479050 -0.0109505427 -0.0199768919 -0.0283948487 -0.0208414306 -0.0534183569 -0.0260436688 -0.0999503038 0.0240793671 0.0300785911 0.0158446982 -0.0176052194 0.0010737159 -0.0571374786 0.0235818800 0.0082456436 -0.0025990857 -0.0421969734 0.0126614972 0.0151597944 0.0345667233 0.0278741927 -0.0189494738 0.0441908505 0.0321337244 -0.0148557058 0.0064749804 0.0011038466 0.0029351689 -0.0270837725 0.0022219902 -0.0494265083 0.0031185565 -0.0061031755 0.0058992808 0.0014038186 -0.0030184213 0.0048092726 -0.0032211009 0.0019566291 -0.0073188125 0.0015148853 -0.0028662575 -0.0058086910 -0.0027120420 -0.0047429703 0.0022944577 -0.0039859737 0.0030744535 0.0037910585 -0.0024601311 0.0000758097 0.0029650478 0.0133506154 0.0045394142 -0.0376338342 -0.0044248178 -0.0019518999 0.0046607519 0.0003240233 -0.0005011782 0.0035160074 0.0030193006 0.0001661309 -0.0049385226 0.0010250135 -0.0011004072 0.0017974417 0.0002554447 0.0014601781 0.0025346772 -0.0024787464 0.0189463089 0.0079370739 0.0078287050 0.0129327555 0.0081075318 0.0008440641 0.0082375059 0.0113133795 0.0004877379 0.0050964026 -0.0015103667 0.0060559751 0.0039725183 -0.0039486405 -0.0090481416 -0.0102661059 -0.0020520911 0.0026625078 -0.0019770213 -0.0061031239 0.0013548528 -0.0034479064 -0.0032187906 -0.0005581334 -0.0017383650 -0.0110905256 -0.0007784168 -0.0164417351 -0.0096973466 0.0066108263 0.0028345442 -0.0013847005 0.0042006496 0.0054741871 0.0068340904 -0.0067038663 -0.0024090318 0.0020186791 -0.0016552847 -0.0143210249 0.0079786803 0.0028997535 -0.0083085805 0.0013011634 0.0081521454 -0.0136260580 0.0039783703 -0.0339646432 0.0445577748 -0.0122180402 0.0205141771 -0.0215198468 0.0043766173 0.0283597019 -0.0391173703 0.0101500048 -0.0201507999 0.0291637511 -0.0079690752 0.1916240464 -0.2676485616 0.0766040711 -0.1403687299 0.2110800610 -0.0454910988 -0.1907671152 0.2752500039 -0.0624447843 0.1393360024 -0.1944671748 0.0426219158 -0.0661268397 0.0888269471 -0.0202972775 -0.0044776384 -0.0041088509 -0.0007397422 0.0054649111 -0.0185347654 -0.0000651770 0.0056310554 0.0085163440 -0.0045543938 0.0079915536 0.0045451701 -0.0401407761 0.0139227196 -0.0252262965 -0.0277763962 -0.0353787154 -0.0415862019 -0.0149326506 0.0909727870 0.0056582753 0.0458683355 -0.0811110907 0.0109222392 -0.0166704625 -0.0550875752 -0.0082287322 -0.0256587733 -0.0663832704 0.0156406203 -0.0539368475 0.0197929817 0.0210186983 0.0085660332 -0.0054465544 0.0066199898 0.0126916565 0.1045395577 -0.0706530859 0.2248707907 0.1232591669 0.0025463763 -0.0345098311 0.0432244075 0.1373509268 -0.3463847066 -0.0703860382 -0.0066661812 -0.0469375690 -0.0950705886 -0.0071013922 -0.0301503846 -0.1057081632 0.0045305718 -0.0500372589 0.1099774367 -0.0504370741 0.0682196800 -0.2125662069 0.1278081751 0.3031993401 0.2382542275 -0.0625343468 -0.0837678925 -0.0347385652 -0.0019381681 0.0164769700 -0.0398617705 -0.0021888804 0.0304292629 0.0219489520 -0.0300780182 -0.0421309765 -0.0016345316 0.0126176125 -0.0076601636 0.0017550839 -0.0103246303 0.0155976703 0.0011698281 -0.0075586827 0.0083085713 -0.0022401993 0.0133398632 -0.0081050951 -0.0011504249 -0.0044685596 -0.0016099210 -0.0024835706 -0.0102547286 -0.0021674149 -0.0496874465 0.0751232638 -0.0330088623 -0.0273450905 0.0616993367 -0.0292791881 0.0175894608 -0.0079957696 -0.0013796833 -0.0071952110 0.0148905774 -0.0118794205 -0.0239072338 0.0182691676 -0.0124908262 -0.0007007449 -0.0031099416 0.0068733282 -0.0015506561 -0.0018144677 0.0049480948 0.0056133302 0.0105771835 -0.0058070451 -0.0036416578 -0.0067687092 -0.0003154582 -0.0043586247 -0.0098448824 0.0010320967 0.0225701826 0.0175446894 -0.0064474155 0.0133498842 0.0179105073 -0.0042571304 -0.0136658969 -0.0084083812 0.0000907515 0.0249743252 0.0316623881 -0.0204202374 0.0356713080 0.0381926179 -0.0237713292 -0.0074887973 -0.0012419292 -0.0120413699 0.0001050055 0.0045046870 0.0142163200 0.0037078665 -0.0008684821 -0.0063811584 0.0023925057 0.0058193393 0.0073663146 0.0002207264 0.0006122251 0.0009215777 -0.0028204654 0.0018078253 -0.0055328075 -0.0016215525 0.0031211661 -0.0036077715 0.0003296569 -0.0017938747 -0.0020148491 0.0109363874 0.0008084179 0.0257707972 0.0033515907 -0.0028963361 0.0042515075 0.0032641145 0.0023122204 0.0040892792 0.0005468574 -0.0015765182 0.0051151745 -0.0107172939 0.0042289738 -0.0235368418 -0.0179261485 0.0004356242 -0.0262762802 0.0009866437 -0.0021524003 -0.0043296016 -0.0011679715 0.0015980906 -0.0002633218 -0.0012130098 -0.0020564970 0.0034682773 -0.0015203485 0.0003431348 0.0032421764 0.0140450894 -0.0040853263 -0.0137863235 0.0126397129 -0.0006471473 -0.0195572588 0.0025609207 0.0011563254 -0.0020900568 0.0017178879 0.0001775367 -0.0002880534 -0.0068646980 0.0020374382 0.0193091229 -0.0000089152 -0.0013113768 0.0045442276 0.0341073997 0.0311008473 0.0312663818 0.0521883831 0.0584262311 0.1270240493 -0.0176812404 -0.0012201553 0.0246821774 -0.0003496114 -0.0017807840 0.0271769685 -0.0401010433 -0.0205190836 -0.0042842381 0.0172916467 0.0138507754 0.0167017523 -0.1001661982 -0.0607431082 0.0492127581 -0.0140780539 -0.0130974926 0.0288959696 0.0335397938 0.0030288769 0.0044892781 -0.1373880766 0.0179399814 -0.3203105024 0.0308022701 -0.0296044034 0.0295738866 0.0095154545 -0.0092490174 0.0283651940 -0.0130542649 0.0133621030 -0.0305466790 0.0152477339 -0.0099488351 -0.0179096212 -0.0027896716 -0.0202134253 0.0197218360 -0.0405069989 0.0232996559 0.0132191611 -0.0217366250 0.0032405047 0.0033290987 0.0501483042 0.0330746976 -0.2303976025 -0.0000981547 0.0053525258 0.0039758468 -0.0087187220 0.0115477802 0.0069910928 0.0016015042 -0.0024224155 0.0027220114 0.0031724350 -0.0029730501 -0.0021290672 -0.0017006562 -0.0005862760 -0.0011243976 0.0025787889 -0.0290635136 -0.0278491331 0.0540763853 -0.0830416854 0.0312438546 -0.0112540202 -0.0055022568 -0.0220746379 -0.0121603595 0.0002894814 -0.0056422914 -0.0301152245 0.0102460304 -0.0021197035 0.0228098163 0.0160386098 0.0077629993 0.0163166500 -0.0103622978 0.0200365729 0.0129690716 -0.0093874765 0.0145751138 0.0955360062 -0.0819126994 0.0776248532 -0.0435270439 0.0700041615 -0.0062465566 -0.0986856452 0.0610085097 -0.0475657689 -0.0078961183 -0.0135875443 -0.0157544979 0.0153728581 0.0058428211 0.0100876213 -0.0007377919 0.0267585585 0.0232390775 -0.0023455707 0.0069709920 0.0012695669 0.0011016991 0.0021631619 0.0041341502 0.0058669472 -0.0096861584 0.0007071087 -0.0108909342 0.0021695624 -0.0028764291 -0.0127250625 0.0035824887 -0.0067066828 0.0098256441 -0.0062946687 -0.0009721690 -0.0396768078 0.0521309292 -0.0143381403 0.0330415454 -0.0655061922 0.0086373394 0.0391681739 -0.0644316724 -0.0017714110 -0.0396624664 0.0584832087 -0.0195836870 0.0084575004 -0.0001758637 0.0044045542 0.0044803098 0.0092063189 -0.0004702327 -0.0096816234 0.0390429693 -0.0060257124 0.0269236235 0.0404064328 -0.0219689018 -0.0005233648 -0.0013705587 0.0054215015 -0.0013734001 0.0040978748 0.0034429859 0.0045510288 0.0045001605 0.0026271464 -0.0117146846 0.0024239834 -0.0106258814 0.0093653816 -0.0042234587 0.0042991678 0.0062492768 -0.0030981840 0.0078725045 0.0090130786 -0.0044115294 0.0104487252 -0.0025376502 -0.0027029928 -0.0012148779 0.0003470037 -0.0007783871 -0.0013325560 -0.0097792968 0.0074204124 -0.0215709713 -0.0128581595 -0.0039844194 0.0172670632 -0.0053771294 -0.0126289140 0.0405822828 0.0113087184 0.0107648525 -0.0010144963 0.0389678197 0.0083146010 0.0124023211 -0.0015963094 0.0005177406 -0.0058065169 -0.0126967668 0.0067812113 -0.0171046543 0.0327461115 -0.0143988614 -0.0478407270 -0.0445990842 0.0179596952 0.0206823105 0.0042420262 0.0004245022 -0.0013510859 0.0048236921 0.0007514013 -0.0035955656 -0.0032288253 0.0039807828 0.0056632184 -0.0142037978 0.0525768338 -0.0320757175 0.0138285794 -0.0503813891 0.0385365028 0.0013278635 -0.0362203667 0.0143898737 -0.0115072881 0.0549694349 -0.0347947566 -0.0000882430 -0.0196547271 0.0164264826 0.0061097005 -0.0318504949 0.0188789352 -0.1655455999 0.2888300040 -0.1454358930 -0.1162793871 0.2187773060 -0.1147928142 0.0383692347 -0.0439974005 0.0037379667 -0.0803379409 0.1147635550 -0.0685709729 -0.0942058168 0.1537280669 -0.0772246467 -0.0168583459 -0.0275594625 0.0184798527 -0.0093476656 -0.0234261430 0.0065204599 0.0186469851 0.0341080521 -0.0193413294 -0.0048597164 -0.0162048876 0.0123955693 -0.0145899697 -0.0237673076 0.0180738534 0.1203450424 0.1402042559 -0.0661478591 0.1037934751 0.1259280296 -0.0676629794 -0.0269205498 -0.0256734639 0.0078267008 0.0930551153 0.0927956691 -0.0523917139 0.0991582297 0.1173841751 -0.0551309661 -0.0186581685 0.0059632066 -0.0209573065 0.0010747484 0.0165561910 0.0261174227 0.0086407937 0.0033073374 -0.0094200403 0.0045877223 0.0100397258 0.0083805971 0.0121959216 0.0004577668 0.0142128288 -0.0271098142 0.0055219707 -0.0447103761 -0.0225417265 0.0124760492 -0.0333931644 -0.0123814097 -0.0002212367 -0.0109644833 0.1045347393 -0.0119383156 0.2165506494 0.0294513563 -0.0182803089 0.0791883385 0.0249012179 -0.0010810475 0.0375118391 0.0194490153 -0.0049029752 0.0322707811 -0.1242660608 0.0218269616 -0.1900330253 -0.1289175005 0.0096800136 -0.2205201554 0.0154354633 -0.0200686325 -0.0296222793 -0.0172800755 0.0069530385 0.0004175335 -0.0179171768 -0.0262551926 0.0257637733 -0.0300641508 0.0160384522 0.0133733563 0.1199830766 -0.0438454326 -0.1107774851 0.0721197186 -0.0046948716 -0.1685743800 0.0235242507 -0.0075270272 -0.0182704741 0.0332156185 0.0094642510 0.0060250813 -0.0743446510 0.0017937355 0.1489139571 0.0122845343 -0.0126298684 0.0678457827 -0.0048043542 -0.0049767494 -0.0044875265 -0.0099641544 -0.0064582312 -0.0202049186 0.0044349328 0.0040597328 -0.0001045928 -0.0021831014 0.0010449417 -0.0092979683 0.0041628614 0.0028405141 0.0005899352 0.0013821225 -0.0023945080 -0.0039056634 0.0116010982 0.0057803279 -0.0047523698 0.0003944589 0.0006136547 -0.0018995189 0.0080690811 0.0012556872 0.0098451011 0.0679640931 -0.0349116062 0.1768738626 -0.0138525630 -0.0109879217 -0.0148401261 -0.0080124312 -0.0022967322 -0.0308021732 0.0102673013 0.0005960916 0.0091026813 0.0108649234 -0.0048433753 -0.0004832590 -0.0009673595 -0.0133466882 0.0006511889 -0.0109682251 0.0023562454 -0.0104421079 -0.0104017679 -0.0033885030 0.0090870798 -0.0512533048 0.0028597258 0.0378398875 0.0093051734 0.0064592318 -0.0002056575 -0.0039221156 0.0024867672 0.0060899718 -0.0018397198 0.0003778961 -0.0000943853 0.0004055731 0.0024630656 0.0035721265 0.0014481723 -0.0140480642 -0.0019707240 -0.0452938072 0.2726972685 -0.3062536529 0.1016353195 -0.1547020240 0.0688313288 -0.0244888716 -0.0052584384 -0.0337123116 -0.0261478298 0.0043930426 -0.0147664606 -0.0547974246 0.0256262005 -0.0152979233 0.0424002855 0.0185536065 0.0192799554 0.0356484854 -0.0146815542 0.0275660203 0.0310888662 -0.0210410709 0.0261211088 0.2046266543 -0.1867675358 0.1425220688 -0.1194398537 0.1505831264 -0.0237972833 -0.1817649285 0.1349006369 -0.0971105086 -0.0086889695 -0.0573028297 -0.0053405444 0.0201323796 0.0337076890 0.0139310047 0.0208689217 -0.0210906292 0.1169401676 0.0076604515 -0.0037786846 0.0092195814 0.0046772652 0.0010421950 0.0051686393 -0.0064755380 0.0069541609 -0.0053825974 -0.0170990570 -0.0101033138 -0.0012142013 -0.0100758657 -0.0191917597 -0.0109418708 0.0071711415 0.0062436839 -0.0070924607 0.0220116816 -0.0346550516 0.0102901820 -0.0289851397 0.0028855224 -0.0040670563 -0.0270738184 0.0211450093 -0.0481136789 0.0195909684 -0.0166265326 -0.0068471036 -0.0007099545 0.0316761925 -0.0030084276 0.0123894268 0.0077530416 0.0071391888 -0.2502479840 0.2867626975 -0.0190766054 0.0171027874 0.0226314295 -0.0119273873 -0.0054580154 0.0059709830 0.0008839385 -0.0067622344 -0.0035040063 0.0056588476 -0.0014984670 -0.0041980004 -0.0038897452 -0.0009456561 -0.0090596874 -0.0057223215 0.0008295235 0.0092010596 0.0053918950 -0.0020163387 0.0106511657 0.0045386704 0.0043231917 0.0090411119 0.0036028807 0.0053674563 0.0048692495 0.0017675438 0.0043460513 -0.0004405087 -0.0037930670 -0.0021845315 -0.0255534185 0.0177843697 -0.0039290762 0.0107898244 -0.0401311928 0.0051129355 -0.0226446118 0.0133843583 -0.0354297288 -0.0160068558 -0.0164760554 0.0108803043 -0.0171227522 -0.0043275341 0.0498088879 -0.0057840460 0.0098456489 -0.0368581105 0.0131893683 0.0264820989 0.0110011671 -0.0208035806 -0.0138243955 -0.0066960740 -0.0122205993 -0.0085862271 0.0019943168 -0.0016834750 -0.0058326074 0.0026241280 -0.0031880107 -0.0034430968 0.0083997828 -0.0050094219 -0.0113583637 -0.0025562875 0.0177794616 -0.0100241993 -0.0027661277 -0.0051785212 0.0152466244 -0.0022066701 -0.0041827809 0.0089809605 -0.0006932134 0.0148150737 -0.0083443371 0.0033661121 -0.0124052035 -0.0014829567 -0.0015712182 -0.0194252904 -0.0052004666 -0.0320560395 0.0388142988 -0.0104694161 -0.0271688194 0.0388260835 -0.0079014622 0.0239775457 -0.0072537467 -0.0035198957 -0.0206143192 0.0598729112 -0.0389674822 -0.0423289613 0.0449187251 -0.0345929234 -0.0087799153 -0.0134250447 0.0081647208 -0.0054330204 -0.0112524946 0.0050725416 0.0101834287 0.0155263141 -0.0083511645 -0.0052680014 -0.0074278351 0.0032804252 -0.0080845165 -0.0116191438 0.0060694116 0.0537412030 0.0667843793 -0.0306209112 0.0545222523 0.0681702008 -0.0343740029 -0.0111687637 -0.0134796704 0.0041965842 0.0383919353 0.0528398674 -0.0271271280 0.0414753564 0.0489855442 -0.0252313741 -0.0107252390 -0.0022560370 -0.0185063148 -0.0004837111 0.0051835462 0.0216729065 0.0033046420 0.0025448824 -0.0026048470 0.0017928713 0.0044395295 0.0015225658 -0.0205985112 0.0062374895 -0.0335690049 0.0354550829 -0.0028077967 0.0496982877 0.0290283485 0.0076765903 0.0444614152 0.0177120180 -0.0069713983 0.0132429669 -0.1318849993 0.0404093212 -0.2259205328 -0.0598555238 0.0116689909 -0.1290283812 -0.0268593386 0.0126794232 -0.0432990383 -0.0324011853 -0.0034610817 -0.0244739853 0.1536393947 -0.0167413958 0.1985204751 0.1189840952 -0.0217305691 0.2316769153 -0.0124980650 -0.0050881024 0.0167913714 0.0042475776 0.0038442008 -0.0201400935 0.0113601311 -0.0092359105 -0.0199368084 0.0071510989 -0.0001560662 -0.0178692197 -0.0645646418 0.0005422647 0.1058375095 -0.0658949121 0.0078885683 0.1048365126 -0.0080487602 0.0055315745 0.0254317689 0.0025350319 0.0041859532 0.0152904565 0.0729460129 -0.0005118127 -0.1169773916 0.0514735404 -0.0105232522 -0.0612046212 -0.0040730876 0.0027449611 -0.0049285574 0.0071803393 -0.0057283027 0.0074680778 -0.0094797867 -0.0165427255 -0.0215155375 0.0045630880 -0.0033329891 0.0135757032 -0.0002155188 0.0069114829 0.0065398017 0.0454926244 -0.0198782583 -0.0281824623 0.0310905698 0.0064050668 -0.0104874030 -0.0404724670 -0.0298744526 0.0080803587 0.0210026841 0.0185525517 -0.0034040735 0.0473516617 -0.0574958824 0.2589099308 -0.0305688929 -0.0316949562 -0.0163547746 -0.0278729660 0.0174122297 -0.0454635983 0.0207435582 0.0163865548 0.0324704088 0.0184357748 -0.0223725987 -0.0246743197 -0.0267439604 -0.0206242517 0.0365701407 -0.0382762524 0.0351624409 0.0131599693 -0.0002103960 -0.0230816324 0.0058435958 0.0226863154 0.0489578986 -0.2546049569 0.0078220521 0.0079598561 0.0083174498 -0.0112395464 0.0061070729 -0.0211689295 0.0005869758 -0.0060756456 0.0075160948 0.0012462521 -0.0033283220 -0.0046463805 -0.0003348577 0.0131658950 0.0037184052 0.0381987605 -0.2499768906 0.2379027283 -0.0522568338 0.0855245037 -0.0400203781 0.0139625032 0.0024757656 0.0168388308 0.0175924660 -0.0052115500 0.0078634862 0.0273824558 -0.0140584762 0.0127400056 -0.0208573743 -0.0086199546 -0.0107460089 -0.0195722659 0.0094094506 -0.0148271266 -0.0189917779 0.0122516211 -0.0139795326 -0.1101383801 0.1047009071 -0.0688250447 0.0644234743 -0.0781734146 0.0124943836 0.1014947504 -0.0710730401 0.0561193850 0.0007680680 0.0391568398 -0.0063559795 -0.0050505607 -0.0215536942 -0.0002093507 -0.0183689971 0.0388814959 -0.0721217740 -0.0076119704 0.0081435019 -0.0051693659 -0.0026910963 0.0002415850 0.0003793498 0.0086845999 -0.0100658448 0.0036554382 0.0056217857 0.0084481086 -0.0017748319 -0.0021592025 0.0154055772 0.0030314072 0.0027599786 -0.0084997827 0.0032032584 -0.0381976522 0.0557512824 -0.0155640784 0.0414712987 -0.0458950534 0.0056961640 0.0438612558 -0.0577307029 0.0328216979 -0.0428768553 0.0526147774 -0.0129742291 0.0034929029 -0.0207138949 0.0057992092 -0.0092059881 -0.0029187685 -0.0061534873 0.2019627147 -0.2194498927 0.0116606952 0.0393188544 0.0134675977 -0.0103958642 0.0036854061 -0.0050995237 0.0031854675 0.0048345308 0.0043850212 -0.0011758670 0.0038013869 0.0089649066 0.0034542728 0.0017113246 0.0015891821 0.0086912502 -0.0017480159 -0.0031990246 -0.0054011332 0.0011871111 -0.0053813836 -0.0077031066 -0.0048008428 -0.0036064186 -0.0069603611 -0.0065223236 -0.0060720600 -0.0027928186 -0.0034535135 -0.0002854536 0.0022169193 0.0010243417 0.0164418844 -0.0117441121 0.0048426166 -0.0036933755 0.0117771397 -0.0018794705 0.0132212589 -0.0147495308 0.0266352483 0.0047607218 0.0200492531 -0.0291432341 0.0057709416 -0.0042594879 -0.0309231939 0.0047971881 0.0035349389 0.0255055482 -0.0103687184 -0.0084923212 -0.0171480277 0.0147481511 0.0240352945 0.0227063873 -0.0027073248 -0.0054572013 0.0023444159 0.0017472155 0.0033856584 0.0021561503 0.0028640370 -0.0003035959 -0.0091805303 0.0066811794 0.0147062090 0.0211267704 0.0116809687 -0.0081418296 -0.0172965775 0.0019898764 0.0369235370 -0.0132949591 -0.0036148427 0.0166094240 0.0147370865 0.0137157046 -0.0077918142 -0.0106136886 -0.0109386295 -0.0081236614 -0.0223165760 -0.0292391219 -0.0266315153 -0.0742353899 0.0370322961 0.0026761297 -0.0411857267 0.0403046109 0.0037461381 0.0706362833 0.0092266433 -0.0156607962 -0.0173267926 -0.0030356014 -0.0159753135 -0.0572221781 -0.0156978041 -0.0120862892 -0.0326348945 -0.0172981231 -0.0272924973 -0.0183313977 -0.0107106434 -0.0133983251 0.0261515348 0.0039374476 -0.0061929728 -0.0115215987 0.0033952174 0.0198416682 -0.0256737387 0.0167083716 0.0438157142 0.0091260125 0.0972750316 -0.0603864718 0.0298875042 0.0717944318 -0.0648404841 0.0554378983 -0.0481677153 0.0171567549 0.0430620267 0.0735217494 -0.0151706261 0.0069169010 0.1068084940 -0.0209331548 -0.0318983543 -0.0144546874 -0.0669798630 -0.0012757671 0.0104264498 0.0749485064 -0.0162077895 0.0315723515 0.0688706236 -0.0115941152 -0.0075276871 -0.0755185963 -0.0311420136 -0.0006059227 -0.0328948382 0.0381258711 0.0113096170 0.0670571841 0.0339606387 0.0018948918 0.0456345882 0.0228138886 -0.0119122292 0.0093473830 -0.1320690599 0.0347665620 -0.2494306768 -0.0486390141 0.0115742955 -0.1322200612 -0.0196624601 0.0283326801 -0.0506408530 -0.0337760062 -0.0049804928 -0.0290438860 0.1976355996 -0.0078679549 0.2008432508 0.1412490067 -0.0367430979 0.2586723666 0.0189943143 -0.0251536758 -0.0475248091 -0.0225953996 0.0141202337 0.0081779847 -0.0170783688 -0.0298383925 0.0312381812 -0.0263852170 0.0143060246 0.0181595961 0.1355690078 -0.0499112335 -0.1149760790 0.0962836945 -0.0006367047 -0.1872002056 0.0254445645 -0.0043663713 -0.0235257920 0.0288168702 0.0075681451 0.0051780224 -0.0747314792 0.0050261448 0.1633214575 0.0064098916 -0.0124011308 0.0677075383 -0.0006029826 -0.0063993224 0.0005716190 -0.0142346561 -0.0007265264 -0.0232390289 0.0123066337 0.0177509826 0.0182874507 -0.0049513745 0.0039057315 -0.0180077351 0.0035642424 -0.0035012912 -0.0051934582 -0.0355959650 0.0159047776 0.0213304659 -0.0174678265 -0.0006028088 0.0049877982 0.0342655562 0.0245156839 -0.0066728614 -0.0153939119 0.0073346756 -0.0081508615 -0.0102483349 0.0099817110 0.0669937722 -0.0212474789 0.0142995374 -0.0010449748 -0.0018696002 0.0166512172 -0.0065241996 0.0130720298 -0.0030845020 0.0048610211 0.0059239434 0.0009739516 -0.0169251820 -0.0168383251 0.0132558334 0.0378560499 0.0013029276 0.0047936455 0.0301620700 0.0178774063 -0.0052823674 -0.0152932857 0.1337319244 0.0108763312 -0.2352191452 -0.0140883091 -0.0070511351 0.0053708772 0.0178653051 -0.0187130603 0.0054218446 -0.0008027605 0.0078515087 -0.0100421971 -0.0010524330 0.0022355054 0.0023607722 0.0023101866 -0.0091675654 -0.0009791361 -0.0321906150 0.1924683901 -0.2005858385 0.0493970410 -0.0759026767 0.0344020556 -0.0128310370 -0.0023014364 -0.0160709131 -0.0127653700 0.0013263996 -0.0080272298 -0.0276866843 0.0137754159 -0.0084684403 0.0224721740 0.0075515547 0.0108538719 0.0178346264 -0.0045419034 0.0110749657 0.0160454937 -0.0106659831 0.0128042972 0.1068307042 -0.0987070171 0.0726541610 -0.0680516846 0.0813920222 -0.0136579588 -0.0860541571 0.0713331147 -0.0476628964 -0.0045344058 -0.0352271879 0.0002772834 0.0101202282 0.0223727113 0.0076982096 0.0141747690 -0.0197447120 0.0752347835 0.0059519522 -0.0042864291 0.0064408885 0.0034532150 -0.0004627856 0.0025855012 -0.0057568299 0.0074756388 -0.0039437929 -0.0097325821 -0.0073176593 -0.0000724831 -0.0039903773 -0.0147798371 -0.0060191166 0.0028275805 0.0061304422 -0.0050219818 0.0270945275 -0.0391116299 0.0112442446 -0.0276537779 0.0164489326 -0.0045926461 -0.0306160854 0.0329789124 -0.0340582180 0.0232867007 -0.0255034604 -0.0005698271 -0.0049183645 0.0256048720 -0.0041894698 0.0073086820 0.0022522561 0.0048722611 -0.1696965374 0.1820231353 -0.0103283193 -0.0199407406 -0.0365214464 0.0181991312 -0.0035323451 0.0041554140 -0.0000006959 -0.0044259498 -0.0031833526 0.0034338438 -0.0016142092 -0.0027449248 -0.0031667970 0.0018064392 -0.0075556066 0.0002022079 -0.0010736464 0.0075649602 0.0016838174 -0.0021534261 0.0093163559 -0.0003001273 0.0007336828 0.0073234469 -0.0009540274 0.0036791083 0.0033908992 0.0012554183 0.0028112076 -0.0001924196 -0.0023529594 -0.0009030741 -0.0154693215 0.0119289209 -0.0007431844 0.0088583362 -0.0334421426 0.0041317482 -0.0145411255 0.0021164167 -0.0274115476 -0.0175099901 -0.0082253745 -0.0105555956 -0.0162674534 -0.0087487567 0.0382822932 -0.0041879992 0.0121577043 -0.0209829848 0.0068189125 0.0226111901 -0.0014280014 -0.0107515624 0.0037913763 0.0089604575 -0.0142779899 -0.0125870220 0.0009771976 -0.0011504923 -0.0039640386 0.0014234406 -0.0023844956 -0.0020420020 0.0058982398 -0.0037482398 -0.0078343804 0.0191535133 -0.0387303883 0.0228729928 -0.0162427094 0.0384780827 -0.0128665560 -0.0037870225 0.0244721261 -0.0044718337 0.0133236329 -0.0297963564 0.0182745292 -0.0047659578 0.0082434172 -0.0127313484 -0.0120609132 0.0109617019 -0.0198087545 0.0885646986 -0.1938154261 0.1060077647 0.0722744161 -0.1510224222 0.0893508198 0.0006521168 0.0312370718 -0.0083783923 0.0427707078 -0.0802451125 0.0401014794 0.0353053084 -0.0914829817 0.0391107543 0.0078146333 0.0211184744 -0.0153467840 0.0018421418 0.0180174199 -0.0077985599 -0.0115674951 -0.0254602441 0.0124021995 0.0073900238 0.0140748272 -0.0050492505 0.0106522248 0.0244295493 -0.0035027462 -0.0861038728 -0.0896603832 0.0419193413 -0.0880229332 -0.0896816490 0.0408949165 0.0281443031 0.0126526483 -0.0029326898 -0.0692077415 -0.0891911899 0.0481149920 -0.0788371958 -0.0809925818 0.0494040144 0.0001693504 -0.0090108586 -0.0092699905 -0.0016347715 -0.0071951772 0.0098140930 -0.0082539088 0.0020549466 0.0171789389 -0.0051242525 -0.0084637847 -0.0168120657 0.0018139261 -0.0074287859 0.0202134907 -0.0065126834 0.0075337876 -0.0069216455 -0.0048580919 -0.0110442293 -0.0166900038 0.0014829998 -0.0010460592 -0.0110117459 0.0447045778 -0.0222636082 0.0496741450 0.0506033829 0.0043539584 0.0517104688 0.0090999470 0.0024481546 0.0126768184 0.0030232236 0.0017355195 0.0050555060 -0.0250199466 0.0074573001 -0.0543498128 -0.0231615876 0.0092979452 -0.0368243170 0.0431663234 -0.0005987107 -0.0675158039 -0.0207588324 -0.0017776466 0.0495399302 -0.0344781589 0.0110026203 0.0570457205 -0.0306516572 0.0070330997 0.0472364127 0.1977357536 -0.0190133644 -0.2854815506 0.1914222181 -0.0237529036 -0.3331961870 0.0307619106 -0.0123445608 -0.0659445189 0.0065069064 -0.0069366053 -0.0283701743 -0.1885261337 0.0048705900 0.3291969196 -0.1000247266 0.0101496188 0.1530661617 -0.0020824893 0.0024289227 -0.0029699391 0.0063890446 -0.0029726548 0.0081358035 -0.0073755840 -0.0117437560 -0.0144925442 0.0029449336 -0.0030516548 0.0104129383 -0.0002361195 0.0042194625 0.0042267641 0.0294457620 -0.0129605230 -0.0181153576 0.0191155061 0.0041728857 -0.0065331451 -0.0268809295 -0.0201433694 0.0053739044 -0.0250766377 0.0100576333 0.0031514628 -0.0436730723 0.0029651732 0.1072975010 -0.0405886263 0.0048170626 0.0136302068 -0.0280581080 -0.0247557499 -0.0074757768 -0.0174116162 -0.0245385713 0.0194068343 -0.0060581019 -0.0083963415 0.0157295672 0.0052095837 -0.0160156884 -0.0159492058 0.0641548547 -0.0484847665 0.0258136762 0.0346964934 0.0107081326 -0.0052274641 0.1141005699 -0.0594922166 0.1031519158 -0.0169402882 -0.0084168587 -0.0094766395 0.0198207026 -0.0109871546 -0.0162204366 0.0002792698 -0.0003300674 0.0042142837 -0.0012556548 0.0013096703 -0.0055141248 0.0008281575 0.0098790406 -0.0020659580 0.0258770117 -0.2156690979 0.1405388688 -0.0084756736 0.0188638946 -0.0162781742 0.0032295695 -0.0023051042 -0.0021074236 0.0127186117 -0.0119580385 0.0000983294 -0.0026663398 -0.0031174762 0.0142947701 0.0060915786 0.0040778468 -0.0001391959 -0.0038697669 0.0107470098 -0.0050518586 -0.0087028181 0.0058115672 -0.0018752645 -0.0156125122 0.0240013067 0.0119724959 0.0018310173 0.0073994473 0.0052314893 0.0334713373 -0.0014269262 0.0211772694 -0.0130636393 0.0137766866 -0.0237366811 0.0166301985 -0.0011257543 0.0225081930 -0.0183938025 0.0724446327 -0.0033039537 -0.0070490345 0.0141903879 0.0023956058 0.0012975393 0.0015574406 0.0088614128 0.0090290705 -0.0116017981 -0.0000420047 -0.0096131084 0.0025771754 -0.0051221499 -0.0195750705 0.0052553119 -0.0086286245 0.0165615568 -0.0078378305 -0.0046985146 -0.0445346822 0.0614718457 -0.0161815229 0.0429350486 -0.0830957400 0.0050483504 0.0504475266 -0.0878605124 0.0005639614 -0.0608947453 0.0859914122 -0.0386964648 0.0044305049 0.0013260884 0.0086424254 -0.0050177487 0.0000773166 -0.0042476642 0.1238431126 -0.1241059206 0.0047331402 -0.0627140965 -0.0075109804 0.0090997930 0.0062603326 -0.0059806188 -0.0045036678 0.0072879337 0.0023106218 -0.0093326300 -0.0005994667 -0.0037703142 0.0053822491 -0.0080687710 0.0210682851 -0.0116815753 0.0067057447 -0.0184471646 0.0014506514 0.0063485626 -0.0194935185 0.0098504894 0.0040252593 -0.0177895515 0.0118008871 -0.0022726488 -0.0021041286 -0.0004223538 -0.0043295358 0.0014398288 0.0046718657 -0.0000529542 0.0254012103 -0.0240187471 -0.0082064101 -0.0215547927 0.0868221202 -0.0109878542 0.0251804096 0.0179041399 0.0484183712 0.0446983689 0.0006854478 0.0641161718 0.0410401126 0.0302344064 -0.0719271406 0.0062295611 -0.0400126289 0.0314743990 -0.0075295259 -0.0583648946 0.0264529423 0.0139539374 -0.0423524780 -0.0569192048 0.0475715976 0.0456853615 -0.0063165951 0.0016049268 0.0076975788 -0.0075546670 0.0032413116 0.0069439194 -0.0054664061 0.0022721484 0.0043547517 0.0431709485 0.0018199058 -0.0033708833 -0.0489651202 0.0655335160 0.1270132129 0.0009279348 0.0462186202 0.0760833892 0.0359821176 0.0111574564 -0.0076403177 -0.0133480952 -0.0477804558 -0.0764684708 -0.0666904576 -0.0884716593 -0.1091244837 -0.1130244320 -0.0515000492 0.1449459997 0.0412107234 0.0134218727 0.0816901052 0.1979985198 0.0515704993 -0.0506740199 0.0203070321 -0.0300896842 -0.0755160774 -0.1470091988 -0.1038597572 -0.0369569755 0.0744987153 0.0452891730 0.1311966549 0.0209690649 0.0502292047 0.0798914400 -0.0467012519 0.0112844584 0.0010915686 0.0045300150 -0.0360041084 -0.0890079030 0.0518491152 -0.0835332241 -0.1328678903 0.0827905213 -0.1371478896 0.1521458460 -0.0742800367 -0.0450214445 0.1254218253 -0.1875958387 0.1207529438 -0.0445416035 -0.0620942358 -0.0736339686 -0.0575526099 0.0882617063 -0.1866546952 -0.0292885843 -0.0884653444 -0.0479525557 -0.1939616854 -0.0026271357 0.0237512830 0.2186186483 0.0546940906 -0.0910045523 -0.2129512564 0.0363601183 0.0325532702 0.2331883896 -0.0203926016 0.0038804515 0.0071647082 0.0070463631 0.0157270759 0.0166390389 0.0160389084 0.0056584078 -0.0017342125 0.0287206250 -0.0306461627 -0.0184143457 -0.0145810692 0.0109798064 -0.0238593653 0.0361533855 -0.0171678138 -0.0307164999 0.0108556030 0.0412110048 -0.0119582362 -0.0174924155 -0.0061494721 0.0038122359 0.0671239342 0.0308562623 -0.0009089670 0.0072246952 -0.0084213569 0.0433743923 0.0026346093 0.0359992524 0.0034679867 0.0295339512 -0.0072257267 0.0309955081 0.0007763975 0.0821934268 0.0018291804 0.0325222501 -0.0329716896 0.0301951611 -0.0414930373 0.0871067796 -0.0904578327 0.0603165374 -0.0278919630 -0.0095464187 -0.0114875603 0.0299638755 -0.0222829441 -0.0697778004 -0.0378004627 -0.0458483023 -0.0159782210 0.0274829292 0.0639076697 -0.1127121953 0.0033283211 -0.0085591783 0.0060155631 -0.0016760835 0.0049077643 -0.0076443715 0.0145728245 -0.0000000408 0.0100515630 0.0250526373 0.0293875072 -0.0127551707 0.0015790058 -0.0245270211 -0.0058571865 -0.0071607990 -0.0043099415 -0.0251389439 0.0120750404 0.0174581887 -0.0345652489 -0.0139590822 0.0155585740 0.0227861576 0.0181245504 -0.0022506338 -0.0344716160 0.0109832742 -0.0111344928 -0.1384032615 0.0093148150 -0.0443945932 -0.0555969965 -0.0101658816 0.0260755601 0.0262941722 0.0024923965 0.0333503157 0.0018231956 0.0013685203 -0.0129676765 -0.0023145331 -0.0041120840 0.0163780777 0.0249901989 -0.0035612137 -0.0314056168 -0.0257545426 0.0272395975 -0.0308411171 -0.0207606965 -0.0015389829 0.0084347495 -0.1404487617 0.0275543380 0.1287914466 0.0088523321 0.0064470521 -0.0064904805 0.0146214821 -0.0169559495 0.0057297129 -0.0054262588 0.0014586137 -0.0022116370 -0.0026109781 0.0035275647 0.0021981391 -0.0006986018 -0.0026009595 -0.0020814922 -0.0088929018 0.0163703147 -0.0531622850 0.0090794020 -0.0175986692 0.0027167653 -0.0035797851 -0.0030652841 -0.0074172228 0.0023000083 -0.0075151694 -0.0029837944 -0.0111819970 0.0028927775 0.0043341774 0.0125860366 0.0055716011 0.0047867319 0.0041939184 0.0066921180 -0.0003158798 0.0009517802 0.0001272035 0.0033161408 0.0292254666 -0.0234557138 0.0311833073 -0.0252511999 0.0361622921 0.0013854860 -0.0085123133 0.0262247675 -0.0048426709 -0.0086996035 -0.0130978756 -0.0103276196 0.0139702179 0.0136092556 0.0168157784 0.0015005996 0.0188182875 0.0481638656 0.0003749121 0.0044815570 0.0056907601 0.0027112907 0.0001288065 0.0053384294 0.0014956672 0.0000735582 -0.0025844448 -0.0108135439 -0.0044417180 -0.0020607025 -0.0116853406 -0.0076616606 -0.0080461047 0.0092957571 0.0010059439 -0.0060517975 0.0006309783 0.0007679704 -0.0003151470 -0.0011214866 -0.0276307518 -0.0026886296 0.0015199470 -0.0173146831 -0.0221369796 -0.0104391979 0.0192583906 -0.0184498538 -0.0005352581 0.0160747780 0.0009948740 0.0020326760 0.0003809386 0.0018311235 -0.0360462029 0.0372466461 -0.0023896803 0.0339685486 0.0251418629 -0.0145636654 -0.0004515188 0.0004231908 0.0007005903 -0.0001342447 -0.0006031045 0.0013447942 0.0000939376 0.0014416162 -0.0007022149 0.0029690372 -0.0028954728 0.0041496461 -0.0027077349 0.0025931912 -0.0011752530 -0.0012049066 0.0014163677 -0.0036760316 -0.0027551572 0.0024449220 -0.0040627298 -0.0003015358 -0.0001308502 -0.0003282319 0.0001262063 -0.0001325715 -0.0002787087 0.0019088872 -0.0019134661 0.0054781256 0.0044350074 0.0028992934 -0.0127643757 0.0023537657 0.0003452806 -0.0112065880 -0.0008585240 -0.0053715676 0.0051648420 -0.0178831642 -0.0050723618 -0.0059939383 0.0009092906 0.0007550253 0.0066536382 0.0015556381 -0.0015963012 0.0089314196 -0.0111336146 0.0027614673 0.0164642572 0.0174115066 -0.0092235560 -0.0097577910 0.0010200754 0.0000577928 -0.0004534806 0.0010300436 -0.0002107081 -0.0008107556 -0.0000042637 0.0000906234 0.0008898278 0.0436583681 -0.0618709013 0.0358371205 -0.0383434899 0.0777043752 0.0275520246 -0.0014219903 0.0532001076 0.0211296436 0.0310861867 -0.0386822960 0.0232422971 -0.0115960335 -0.0034805669 -0.0477830154 -0.0406630676 -0.0128316534 -0.0680198262 0.0780857212 -0.2819413733 0.1949728300 0.1271421212 -0.2095341097 0.1529335711 0.0687124348 0.0617976837 -0.0288550660 0.0765299824 -0.1445569386 0.0392750388 0.0042829031 -0.1724254039 0.0443712040 -0.0296966461 -0.0271756429 -0.0346413163 -0.0085385102 -0.0272988934 -0.0217981911 0.0224259224 0.0102359472 -0.0073168797 -0.0055328292 0.0040736837 0.0324871450 -0.0232742983 0.0141500591 0.0468725425 0.0206788733 0.0983872869 -0.0741892988 0.0772172550 0.0707421606 -0.0676725539 0.0469648263 -0.0474824188 0.0165577319 0.0602793846 0.0756044841 -0.0083094066 0.0135741378 0.1050239274 -0.0154636969 -0.0303364543 -0.0290297950 -0.0804482160 -0.0030264129 -0.0015714177 0.0894285142 -0.0137295507 0.0293573262 0.0618064722 -0.0093800266 -0.0061297391 -0.0687240028 -0.0000418981 -0.0055606749 0.0659367441 -0.0284437152 0.0308263690 -0.0574151135 -0.0116268326 0.0128933948 -0.0612531222 0.0282746617 -0.0396420543 -0.0487431118 0.1387162910 -0.0186246644 0.2512167730 0.1497239868 -0.0328448867 0.1160639276 0.0419393722 0.0479660641 0.0430175383 -0.0072209669 -0.0141567828 0.0483073513 -0.0930765690 0.0662804309 -0.2510612879 -0.1686426273 0.0181347648 -0.2184534845 -0.0287149389 -0.0157978586 0.0493319458 -0.0005880825 0.0027167112 -0.0451697315 0.0184342755 -0.0456672053 -0.0357664158 -0.0014674939 0.0155803611 -0.0444280641 -0.0905461120 -0.0305357802 0.2027101047 -0.1502304361 0.0301214280 0.2037850420 -0.0142976695 -0.0137694566 0.0479045303 0.0321447227 0.0224219058 0.0363293169 0.1073656722 -0.0221029971 -0.2191987795 0.1047131463 -0.0044949705 -0.0715258636 -0.0013860394 -0.0014698154 -0.0018341350 -0.0033254909 -0.0005857865 -0.0055573696 0.0020849298 0.0039394464 0.0018000051 -0.0024748429 -0.0004139797 -0.0046995060 0.0004764324 0.0009572674 0.0003927149 0.0075199444 -0.0013972825 -0.0031763927 0.0017727885 0.0007785210 -0.0001642458 -0.0039734552 -0.0037394008 0.0019101959 0.0065865313 0.0106178463 -0.0096651831 -0.0225561761 -0.0291972467 0.0623398043 -0.0236867433 -0.0262801228 -0.0023920324 0.0057513543 0.0118623281 -0.0143870680 0.0159441090 0.0195312812 0.0084459393 0.0086756257 -0.0248293604 -0.0066906122 0.0023908959 -0.0142024828 0.0148548937 -0.0061336515 0.0305388469 0.0015093617 0.0072056288 -0.0119163471 0.0083162107 -0.0138173788 0.0342977527 -0.0303465999 -0.0149859640 -0.0020531127 0.0030452515 -0.0119779937 0.0047942919 -0.0055369093 0.0020707142 -0.0012914624 -0.0000914195 0.0019571236 -0.0043970540 -0.0024903362 0.0013807177 0.0052353013 0.0017513857 0.0591164410 0.0113065550 0.2735044626 0.1426213899 -0.0748724494 0.0918372239 -0.0097837786 0.0352048721 0.0191758502 -0.0686058011 0.0968708796 -0.0077941666 -0.0198381982 0.0606467141 -0.0899466969 -0.0189032351 -0.0959558747 0.0010394974 -0.0004477717 -0.0702414393 0.0254551359 0.0670117239 -0.0584599217 0.0205110572 0.3012011404 -0.2908041880 0.0778381941 -0.2476462782 0.0962336672 -0.2451185522 -0.2346072235 0.0415945203 -0.1142894835 0.0789055779 0.0791530652 0.0979660215 -0.1035710912 -0.1006740578 -0.1394890314 0.0239498402 -0.2137777878 -0.3384165912 -0.0041671188 -0.0342978596 -0.0515971977 -0.0237144811 -0.0013773264 -0.0461603839 0.0053269006 -0.0095645721 0.0261291212 0.0740256610 0.0378075560 0.0154360171 0.0809013892 0.0736695586 0.0578359931 -0.0642930155 -0.0214371691 0.0536404821 -0.0695433632 0.0938408062 -0.0128707413 0.0392288429 0.1476186805 0.0304599786 0.0460021372 0.0461207543 0.1995057522 0.0031764789 -0.0536925981 0.1153005123 0.0191995303 -0.1396165919 -0.0092154210 -0.0137423125 0.0111476568 -0.0078120894 0.0279687691 -0.0201894423 -0.0095725394 0.0116089466 0.0123289684 -0.0070777215 -0.0000980895 0.0004497422 0.0019667888 -0.0063637196 0.0050987008 0.0010533124 0.0016279900 -0.0031181680 -0.0000734635 -0.0038225208 0.0007857319 -0.0036818068 0.0032080627 -0.0003265755 0.0015242811 0.0020070868 -0.0004994515 0.0030734289 0.0030825676 -0.0003334849 0.0034609345 0.0017298282 0.0003481259 0.0018289102 0.0018511027 -0.0007811192 -0.0024988640 -0.0034479519 -0.0011917974 -0.0050863180 -0.0052389976 -0.0001076805 0.0022602690 -0.0012872258 -0.0056653863 0.0140866650 0.0001921336 0.0015479803 -0.0016797373 0.0103629596 0.0013533204 0.0036587498 0.0063515727 -0.0015468868 -0.0034885259 -0.0068978397 0.0034485540 -0.0031762030 0.0108817930 -0.0060960725 -0.0157605064 -0.0131552067 0.0036084671 0.0049042804 0.0027605505 -0.0008286211 -0.0048096520 0.0029215873 -0.0002610900 -0.0029080927 0.0013941809 0.0000347408 -0.0034648815 0.0149706418 -0.0195610569 0.0114501490 -0.0076242954 0.0125352088 -0.0152365270 -0.0066197345 0.0013275399 -0.0084169020 0.0073853808 -0.0088059427 0.0057859564 -0.0053895612 0.0082848993 0.0047062548 -0.0046490911 0.0103663503 -0.0027964045 0.0390394293 -0.0878475108 0.0357140283 0.0107727125 -0.0670464126 0.0376745515 -0.0046144296 0.0075927106 -0.0018898833 0.0108131123 -0.0460332259 0.0317348877 0.0203572135 -0.0369450882 0.0230156410 0.0004157518 -0.0001397848 0.0208902642 -0.0056639777 0.0044456692 0.0156642254 0.0037061850 0.0073431338 -0.0041528361 -0.0068860585 -0.0089192817 -0.0128818897 -0.0018355850 -0.0150741894 -0.0103146600 0.0333558211 0.0275830753 0.0032061835 0.0126215093 0.0463370959 -0.0109840330 -0.0209714875 0.0036457521 -0.0016716336 0.0140080882 0.0340256158 -0.0301216001 0.0303468618 0.0128249436 -0.0215790315 0.0016230741 -0.0013798532 0.0008139644 -0.0010081744 -0.0024766381 -0.0010401406 0.0059970365 -0.0064185099 -0.0191444492 0.0034824481 0.0050686027 0.0205466736 -0.0068973038 -0.0026883021 0.0133536712 0.0046415823 0.0115831450 -0.0010431647 0.0037236702 0.0123650051 -0.0075820284 0.0132078302 -0.0151387468 -0.0141519229 0.0088104855 0.0112762075 0.0242028759 0.0378916085 -0.0094211893 0.0128775877 0.0074825539 0.0230622314 0.0024787253 -0.0158383839 -0.0086796201 0.0109450670 0.0167724436 0.0197920468 -0.0366268568 -0.0227200952 -0.0070703708 -0.0006722685 0.0034215496 -0.0102616319 -0.0016889833 -0.0055007933 0.0039368304 -0.0064080028 -0.0020544984 -0.0182179317 -0.0006264559 -0.0114969745 0.0123189538 -0.0083090744 0.0131169704 -0.0197151160 0.0197974775 -0.0119049394 0.0122486808 -0.0076279533 -0.0000500108 -0.0126049880 0.0029590700 0.0133959211 0.0071782779 0.0097955006 -0.0028849368 -0.0120212633 -0.0123882507 0.0242837077 -0.0015253748 -0.0021918482 0.0035124724 0.0104666096 0.0039939003 0.0288961748 -0.0056570013 0.0431864389 -0.0286792312 -0.0529110108 -0.0427191870 0.0222688717 -0.0051373293 0.0477591927 0.0039557685 0.0033250548 0.0016690982 -0.0239109127 -0.0052457460 -0.0007332164 0.0240276452 0.0140064382 -0.0156649500 -0.0037213207 0.0010186661 -0.0107506292 0.0556913364 0.0460737785 -0.0458267342 -0.0850759465 -0.1396027598 0.2012792630 -0.0735663554 -0.1324168803 -0.0120060974 0.0217309174 0.0595074159 -0.0704087980 0.0713173932 0.1044146761 0.0393499903 0.0300146584 -0.1213580036 -0.0395743080 -0.0032556729 -0.0656381633 0.0714092155 -0.0181087064 0.1469661338 0.0123634951 0.0452216156 -0.0628005487 0.0422173882 -0.0535592271 0.1651697060 -0.1467326401 -0.0843573884 -0.0183986961 0.0272227439 -0.0745990893 0.0389825809 -0.0333604707 0.0309231004 -0.0011272489 0.0033302479 0.0159584973 -0.0260873698 -0.0183779831 0.0188234620 0.0224461516 0.0200923848 -0.0163294804 -0.0237258010 -0.0718757317 -0.0502536015 0.0365855236 -0.0304325228 0.0046172333 -0.0080201144 -0.0008142275 0.0256749767 -0.0343401014 0.0033882200 0.0125607379 -0.0223231847 0.0324962491 0.0009010320 0.0320436985 -0.0025242652 0.0010688077 0.0250892391 -0.0124092621 -0.0262661033 0.0202474273 -0.0100258820 -0.1213309886 0.1173686894 -0.0394515013 0.1045931475 -0.0544590490 0.0904109314 0.0889016198 -0.0130387001 0.0404388810 -0.0296167924 -0.0252586262 -0.0328727429 0.0324646889 0.0332606338 0.0467657914 -0.0187143056 0.0910919064 0.1014010209 0.0021247826 0.0085064656 0.0185365464 0.0102914154 -0.0015915020 0.0179889338 -0.0082905432 0.0061520787 -0.0109157584 -0.0232042231 -0.0110505719 -0.0057926851 -0.0241871224 -0.0297660731 -0.0173625128 0.0204425425 0.0111962232 -0.0201206797 0.0450631197 -0.0688160420 0.0145484912 -0.0119662080 -0.0348809588 -0.0066111295 -0.0356044680 0.0152279373 -0.0772421001 0.0181447865 -0.0038864579 -0.0324457698 -0.0207835825 0.0634168270 0.0014053842 0.0010500562 -0.0071302208 -0.0028655624 0.0214092632 -0.0243075992 0.0036134334 0.0543342642 0.0481682426 -0.0283967314 0.0019478761 -0.0019164971 -0.0037710100 0.0050368174 -0.0017481647 -0.0052690232 -0.0017740568 -0.0029027617 0.0015164912 -0.0022784209 0.0083925831 -0.0050511492 0.0019989387 -0.0067645698 0.0007816238 -0.0005813787 -0.0064243084 0.0052485952 0.0022870932 -0.0062081328 0.0050457236 -0.0003999153 0.0004386795 0.0003791686 -0.0015679905 0.0009043479 0.0022637055 0.0014705963 0.0068890537 -0.0051410682 -0.0018600591 -0.0081923076 0.0336766303 -0.0037677075 0.0109287640 0.0045535903 0.0111688887 0.0182158137 -0.0072088562 0.0356052838 0.0140612827 0.0122995710 -0.0235826890 0.0016246227 -0.0169850915 0.0091543037 -0.0017079709 -0.0205317437 0.0120584271 0.0030235969 -0.0186665213 -0.0229490149 0.0173907380 0.0171345151 -0.0053605335 0.0003466108 0.0045502815 -0.0059475472 0.0005332000 0.0047228207 -0.0004747268 -0.0009734472 -0.0009821342 0.0430691818 -0.0606420538 0.0350023843 -0.0075683805 -0.0031985957 -0.0949513966 -0.0374050211 -0.0177168571 -0.0692497940 0.0144478726 -0.0380121068 0.0244874597 -0.0224276986 0.0531689320 0.0557203882 0.0083536218 0.0658747935 0.0390540283 0.1238578750 -0.2095385087 0.0197936375 0.0077900641 -0.2335506346 0.0812665046 -0.0830593453 0.0146852587 0.0119352581 0.0147140209 -0.1508406524 0.1505459721 0.1118434077 -0.0697921465 0.0924203230 0.0028549124 0.0046760405 0.0960951174 -0.0286402568 0.0277790976 0.0760112967 0.0165625327 0.0288951509 -0.0165975808 -0.0347931299 -0.0390146771 -0.0670807779 -0.0074932837 -0.0660648840 -0.0527111715 0.1391275400 0.1150843038 0.0244593759 0.0383049395 0.2065170693 -0.0428472203 -0.0918973138 0.0184093467 -0.0084276668 0.0416772712 0.1459279208 -0.1347818589 0.1221547851 0.0411305364 -0.0950995273 0.0369279516 0.0101853542 0.0712883744 -0.0027387007 -0.0186567267 -0.0823159514 0.0260823235 -0.0292044309 -0.0856799486 0.0151487137 0.0223607341 0.0921789274 -0.0290520960 -0.0115876652 0.0334142636 0.0267979378 0.0422222254 0.0087298404 0.0163992168 0.0536361512 -0.0158371899 0.0442557230 -0.0506842652 -0.0448842310 0.0080797827 0.0558690247 0.0547742335 0.1108792775 -0.0321551499 0.0243185097 0.0220038171 0.0847372217 0.0004115655 -0.0634886247 -0.0357413928 0.0368535351 0.0896411194 0.0669546388 -0.1037055934 -0.0615937727 -0.0424452760 0.0345941918 0.0147282041 -0.0470945163 -0.0168348164 -0.0247919542 0.0206064689 -0.0232092396 -0.0081904935 -0.0818956852 0.0027201028 -0.0463648750 0.0523471600 -0.0309593180 0.0720977351 -0.0906964854 0.0774816616 -0.0302138702 0.0594265063 -0.0456532727 0.0001671542 -0.0539235026 0.0083113644 0.0537291981 0.0301177231 0.0393273702 -0.0201672876 -0.0509325629 -0.0366309126 0.0948076290 -0.0012358111 -0.0074621404 0.0021236333 -0.0023585658 0.0016981637 -0.0087163978 0.0080484515 -0.0080219509 0.0107804832 0.0239619605 0.0233808504 -0.0101645393 0.0022756419 -0.0201916071 -0.0051847071 -0.0040514804 -0.0013035290 -0.0010135536 0.0039786716 0.0052713086 -0.0186129225 -0.0114535169 0.0101832296 0.0080295187 0.0058987894 0.0046913552 -0.0005389224 0.0021144860 -0.0070438979 -0.0411864228 0.0039214743 -0.0738920979 0.0029062719 -0.0082802194 0.0147648855 0.0085711173 -0.0090772523 0.0007811254 0.0008146530 0.0050464477 -0.0024371755 -0.0055692832 0.0060227654 0.0052262077 0.0028298052 -0.0063800041 -0.0216167190 -0.0656944435 -0.0066764068 0.1601453163 0.0291290872 0.0067511216 -0.0739192644 0.4044734601 0.0149029909 -0.7718538344 0.0023813825 -0.0002830569 0.0023247612 -0.0067163804 0.0043834953 0.0011692923 0.0006002324 -0.0007632930 0.0007726830 0.0011727507 -0.0013780307 -0.0005399029 0.0000206559 0.0004891456 0.0007957125 -0.0000054310 -0.0001879348 0.0002463533 0.0003169921 0.0000517177 0.0001880434 -0.0000210144 0.0001458973 0.0001198568 -0.0000149953 0.0000367822 -0.0000230611 -0.0000477048 0.0001405395 -0.0000075539 0.0000414039 -0.0001838489 0.0000113594 -0.0000075812 0.0001011037 -0.0001454788 0.0000148750 -0.0001546382 -0.0000040645 0.0004529842 -0.0003220749 0.0002917261 -0.0005550430 0.0003134813 -0.0004565944 0.0002460329 0.0001742053 0.0000501663 0.0000122924 -0.0000039912 0.0000199701 -0.0000111525 -0.0000014624 0.0000364975 -0.0000291590 0.0000848255 -0.0000720156 0.0000044579 -0.0000541269 -0.0000019807 0.0000363194 -0.0000225237 0.0000893676 -0.0001113717 -0.0000131985 -0.0000494111 0.0000273346 0.0000454781 -0.0000468523 -0.0000656242 -0.0000486952 -0.0000102668 0.0000491083 0.0000337924 -0.0000419614 0.0001859370 -0.0004995718 0.0001779400 0.0004505005 0.0000101347 0.0003484863 0.0000139596 -0.0000912103 -0.0000982068 0.0001219023 -0.0000296217 0.0000110788 -0.0000685704 0.0002360734 0.0000276327 -0.0000893298 -0.0000155056 -0.0001548525 0.0007117025 -0.0010783867 0.0000608009 -0.0217372246 -0.0327297806 0.0122249585 -0.0000922595 0.0000599021 0.0002240705 -0.0001195045 -0.0000048731 0.0001243577 0.0000292331 0.0001258842 -0.0001049318 -0.0001933372 -0.0005783492 0.0000995799 0.0001924888 0.0003649063 -0.0000186853 0.0000962408 0.0010165953 -0.0000762619 0.0002391575 0.0003688289 -0.0000023370 0.0000182845 0.0000255847 0.0000128818 0.0000676706 -0.0000314727 -0.0000911455 -0.0005122699 0.0003315211 -0.0008411269 -0.0003369645 0.0004881978 -0.0017721674 -0.0000381057 -0.0016914689 0.0014972478 -0.0024505523 -0.0022235594 -0.0004088795 -0.0013654666 -0.0016165519 -0.0009318202 0.0041546982 -0.0005537954 0.0015169042 -0.0012558240 0.0004368715 0.0010970532 0.0004074998 -0.0009611007 -0.0004373012 0.0001897624 -0.0008336156 -0.0006751645 0.0001206600 -0.0000221503 -0.0000878633 0.0001365056 -0.0000690751 -0.0001357200 0.0000612550 -0.0000139974 -0.0000572814 0.0026567344 -0.0042859108 0.0020665814 -0.0004473887 0.0015899932 -0.0012171007 -0.0002811703 0.0011737497 -0.0017150682 0.0010840398 -0.0017100767 0.0007014853 -0.0017392245 0.0018629898 0.0007057223 -0.0003968194 0.0016806223 0.0006132264 0.0025101431 -0.0087382370 0.0032191145 0.0059712949 -0.0126431317 0.0053401075 -0.0010914344 0.0014235109 -0.0001145471 0.0009368698 -0.0118951405 0.0069285533 0.0015433182 -0.0018248271 0.0025705139 0.0039480474 0.0133087549 0.0026478724 -0.0007416841 0.0187122883 -0.0045994342 -0.0090451569 -0.0118739319 0.0029547500 0.0140639354 0.0076503718 -0.0015868581 0.0072655365 0.0111045688 0.0039712266 -0.0178887014 -0.0319334217 0.0177718907 -0.0889550299 -0.0721136728 0.0303063930 0.0079693008 0.0092497245 -0.0023089996 -0.0329612320 -0.0952505168 0.0356741473 -0.0162454417 -0.0190854150 0.0205459385 0.0003766653 -0.0002024720 0.0006047310 -0.0000892398 -0.0004655930 -0.0005961403 -0.0013742873 -0.0017131929 0.0025479826 -0.0014652582 -0.0024167103 -0.0004240681 -0.0052377330 0.0020275493 -0.0052091529 0.0061688359 -0.0036754499 -0.0028305441 0.0024573294 0.0116462495 0.0014785252 0.0068860618 -0.0063766062 -0.0005507388 -0.0052258109 0.0137762280 0.0083511037 -0.0097371210 -0.0047451199 -0.0271324852 -0.0015748215 0.0078203205 -0.0028702557 -0.0083554832 -0.0044781157 0.0058836668 0.0079308237 0.0061056737 0.0090707000 -0.0114554764 -0.0031063830 0.0015420345 -0.0351285934 0.0002934303 0.0379263592 0.0487498761 -0.0029838963 -0.0911300678 0.0245801897 0.0039295265 -0.0368219874 0.0139604553 -0.0111941285 0.0015289125 -0.1155939827 0.0219009103 0.1519787738 -0.0261628149 -0.0061200951 0.0704740822 -0.0166953911 0.0130640487 0.0326895682 -0.0250000983 0.0028674954 0.0309876075 0.0393345396 0.0086939920 -0.0579389964 0.1434845295 -0.0076061568 -0.2732891580 -0.0002363287 -0.0000936684 -0.0000912699 -0.0002365345 -0.0004978759 -0.0008443497 0.0001521537 -0.0001489975 -0.0003407935 0.0002550480 0.0001478990 0.0002624510 0.0002348470 0.0001470852 0.0000521556 -0.0003165012 -0.0001331363 -0.0001238083 0.0007052861 0.0003558327 -0.0003352157 -0.0000861561 -0.0001678211 0.0000007117 0.0304763603 -0.0136881280 0.0747821467 0.3932773271 -0.1063051311 0.7698011008 -0.0611572880 0.0215072056 -0.1592437615 0.0051551028 0.0012518851 0.0222694912 -0.0083257396 -0.0036671939 -0.0068440736 -0.0024079048 -0.0018975289 0.0034248035 0.0097273967 0.0039182087 -0.0057158651 -0.0062717719 0.0035078728 0.0150355244 0.0036246601 0.0005109421 -0.0072964542 0.0364505905 0.0053981629 -0.0670404318 -0.0052837085 -0.0017369530 -0.0009857400 0.0014647024 0.0004317087 -0.0014325390 0.0006008602 0.0003706765 -0.0004952915 0.0002286099 -0.0006215091 -0.0007192392 0.0013141611 0.0008710841 0.0009167250 -0.0004177066 0.0017823993 -0.0022340728 -0.0012579958 -0.0001763319 -0.0001021509 0.0000823844 -0.0002328703 -0.0001195888 0.0001463205 -0.0002136845 0.0001139953 0.0009501850 -0.0013656840 0.0008256897 -0.0009609267 0.0019494584 -0.0005597029 0.0011850969 -0.0012528224 0.0009615662 -0.0006844292 0.0007127713 -0.0002925667 -0.0072823910 0.0058045237 -0.0040469006 0.0079912302 -0.0054197449 0.0051211373 -0.0046905910 0.0011029799 -0.0026938352 -0.0001891538 -0.0004337803 -0.0003061600 0.0000414078 0.0003386934 0.0001824426 -0.0000838532 -0.0002310233 0.0016395315 0.0002904800 -0.0002736964 0.0002577996 0.0001645013 -0.0001001245 0.0005293329 -0.0005703500 0.0002694807 -0.0002671859 -0.0002662305 0.0004649815 -0.0003966327 -0.0002903583 0.0001397443 -0.0001880072 0.0003788976 -0.0004003804 -0.0000494338 0.0005518103 -0.0012762446 0.0002085314 0.0017762206 -0.0025614861 0.0001117678 0.0013812259 -0.0019364835 -0.0001194857 -0.0016468599 0.0021309377 -0.0008808322 -0.0011595977 0.0017369646 0.0001032958 0.0004848854 -0.0000916319 0.0000477632 -0.0041773318 0.0034565695 0.0001971858 -0.0016764559 -0.0029557788 0.0010338795 -0.0000527819 0.0000209803 0.0000415220 -0.0001440759 -0.0000505452 0.0000339349 -0.0000401824 -0.0001417609 -0.0000874562 -0.0000137598 -0.0000096780 0.0000225471 0.0000281359 0.0000171046 -0.0000060686 0.0000185523 0.0000845634 -0.0000247250 0.0000180302 0.0000340661 -0.0000022128 0.0000755988 0.0001034752 0.0000665392 0.0001014644 -0.0000248597 -0.0000786217 -0.0000587553 0.0001206300 -0.0001600110 -0.0001088722 0.0000316164 -0.0000133381 -0.0000071256 -0.0001421316 0.0001515051 -0.0001588691 -0.0002204209 0.0000425268 -0.0002605101 -0.0001501667 -0.0001008845 0.0002573505 -0.0000143771 0.0001262151 -0.0001144957 0.0000389080 0.0001079758 0.0000318927 -0.0000934429 -0.0000331260 0.0000369276 -0.0000830650 -0.0000698803 0.0000472895 -0.0000423930 -0.0000919609 -0.0000332617 -0.0000374942 -0.0000106853 0.0001743626 -0.0001066682 -0.0002458016 -0.0148794290 0.0405824799 -0.0189536758 0.0026214211 -0.0197976725 0.0028333616 -0.0067048082 -0.0185429197 0.0065552318 -0.0071240513 0.0157092010 -0.0057627399 0.0125203131 -0.0125961816 0.0042435671 0.0033934534 -0.0118507647 -0.0028057639 -0.0231246942 0.0712556820 -0.0371866446 -0.0743033873 0.1026935359 -0.0451689359 0.0064192168 -0.0135084828 0.0017802023 -0.0153267045 0.1093215020 -0.0520947007 -0.0099091888 0.0120076464 -0.0150661000 0.0003396015 0.0012633886 0.0004602380 -0.0002142406 0.0019018141 -0.0001176452 -0.0006961894 -0.0010950782 0.0002453240 0.0011742608 0.0006336289 -0.0004637452 0.0006019201 0.0008638664 0.0003211028 -0.0013310541 -0.0024335777 0.0016676482 -0.0082951754 -0.0059514754 0.0026790682 0.0005721903 0.0008688603 -0.0002247808 -0.0032445020 -0.0085925242 0.0029634477 -0.0011922275 -0.0014534491 0.0015695201 -0.0019042505 0.0025711258 -0.0022548838 0.0002977837 0.0035499664 0.0013777992 -0.0000942857 -0.0001886863 0.0001073651 -0.0001237226 -0.0001750136 0.0000971640 0.0497864609 -0.0089524106 0.0848511388 -0.0305489826 0.0077371952 -0.0368275289 -0.0175250721 -0.0052079974 -0.0251126030 -0.0262155352 0.0060335159 -0.0302803792 0.0136144461 -0.0114658547 0.0283845773 0.1401500601 -0.0317712426 0.2722121475 0.0213570320 -0.0116919829 0.0370622545 0.0125048706 0.0051760103 -0.0056220280 -0.1179849392 0.0109663037 -0.1487364309 -0.0083482258 0.0080452826 -0.0412844980 -0.0008450594 0.0016191134 0.0093909602 0.0042321441 -0.0011073433 -0.0106097959 0.0014524384 -0.0037097240 -0.0045619935 -0.0029903410 0.0032895275 -0.0032718719 -0.0138798276 -0.0014439485 0.0178648140 -0.0099878952 0.0033718375 0.0074621005 -0.0035204028 -0.0065201610 0.0034629110 0.0016702874 0.0027921028 0.0048890267 -0.0020443391 -0.0067007622 -0.0123775055 0.0166717581 0.0033301380 -0.0239050276 -0.0000619342 0.0000572727 -0.0000449705 0.0001113911 -0.0001460012 0.0000072621 -0.0001249676 -0.0001382964 -0.0002056974 0.0000932507 -0.0000036402 0.0002098905 -0.0000232585 0.0001978185 -0.0000022447 0.0008038127 -0.0000481308 -0.0004034131 0.0005955252 -0.0002340712 -0.0000978890 -0.0006673309 -0.0005528220 0.0002281896 0.0030324109 0.0015558513 -0.0003003619 -0.0010459301 -0.0024246864 0.0050576866 -0.0007142178 -0.0022704007 -0.0012341352 0.0007058569 -0.0005871923 0.0010049389 -0.0000001971 0.0028229572 -0.0005947261 -0.0012050619 -0.0000532915 -0.0012076427 -0.0038316848 -0.0018507704 -0.0009882498 0.0007570590 0.0003344992 0.0001272538 0.0007158309 -0.0009138464 0.0005780213 -0.0011845334 0.0005282868 -0.0000561844 -0.0006654884 -0.0006867689 0.0024530659 -0.0009459003 -0.0000620949 0.0002900988 0.0035893086 0.0012617651 -0.0020317856 0.0004945429 -0.0015415646 0.0006948061 0.0000792230 0.0003589130 0.0024394824 0.0003957626 -0.0117443119 -0.0272988112 0.0026571868 -0.0087637383 0.0013973628 -0.0015604302 -0.0019030815 -0.0039510261 0.0028833895 -0.0119845062 -0.0096727448 -0.0055279527 -0.0039165798 0.0120882396 0.0074059396 0.0141895119 0.0017587174 0.0054370906 0.0029284511 0.0003114614 -0.0022229331 0.0030903066 0.0002354926 -0.0165891430 0.0153115015 0.0089621568 0.0150599233 0.0078146102 0.0226453372 -0.0044622432 0.0184318029 -0.0040191765 -0.0064925050 -0.0103949829 -0.0161494689 0.0194254751 -0.0010254399 0.0180743876 0.0058192262 0.0214468265 0.0225639162 -0.0402391245 0.0587583303 -0.0104206010 -0.0436863293 0.0689735184 -0.0108228527 0.0592939038 -0.0957363620 0.0204996993 0.0375801508 -0.0635122850 0.0148343238 0.0123353321 -0.0357535174 0.0008100248 -0.0261692835 0.0473413410 -0.0127556463 -0.3486838407 0.4667785309 -0.1347789266 -0.2675754029 0.3714019626 -0.0815870141 -0.1253122320 0.1749772777 -0.0709059978 0.1787619204 -0.2326545478 0.0562780472 0.2747898197 -0.3839809572 0.0970361394 0.0003064353 -0.0015809594 -0.0001174553 -0.0113056038 0.0143915845 -0.0004817502 0.0005648757 -0.0004376574 0.0002039505 0.0045640196 -0.0015068537 -0.0058680337 0.0132381716 0.0017987232 -0.0030533928 0.0028944476 0.0142858105 0.0077818528 0.0030475993 -0.0030542639 -0.0000977102 -0.0027979917 -0.0001035829 0.0003149960 -0.0032280894 0.0000914074 0.0007111465 -0.0022218717 -0.0007609863 -0.0005109585 -0.0052113183 -0.0094341978 -0.0081272690 -0.0097485427 0.0017014192 0.0082690339 0.0030577445 -0.0024697984 0.0076540683 0.0056807207 -0.0005071747 -0.0021359898 0.0014885574 0.0033696832 -0.0105861863 -0.0088972383 0.0004410720 -0.0077622218 -0.0031465178 0.0025500909 0.0011723411 0.0128818509 -0.0050472828 -0.0045779807 0.0039589559 -0.0019622818 -0.0008989155 -0.0057320090 0.0053616573 0.0075832483 0.0013255583 0.0022481696 0.0016756991 -0.0012927665 0.0040388709 0.0082900134 0.0016021052 0.0073201188 0.0032507299 -0.0168544166 0.0103662111 0.0230019261 0.0007553078 0.0007088866 -0.0000976209 -0.0001028951 -0.0015994531 -0.0010970926 -0.0012690905 -0.0002626621 -0.0004117677 0.0015048259 -0.0006696423 0.0007231174 -0.0021248785 0.0027897624 -0.0007405249 0.0001840528 -0.0009998723 0.0019102220 -0.0019940788 0.0013291984 -0.0030335633 -0.0062135740 -0.0003747869 0.0039848174 0.0004283462 0.0002561236 -0.0013863992 0.0018294421 -0.0149600562 0.0070809019 -0.0049863470 0.0070030945 -0.0014901336 0.0000235886 0.0003206711 -0.0001199794 -0.0004816326 0.0003425257 0.0006380132 0.0002613281 -0.0000828278 0.0000170924 -0.0003978596 -0.0000115785 -0.0007575693 -0.0000438199 0.0000504812 -0.0001619960 -0.0009232584 -0.0008320793 0.0005035312 -0.0002208613 0.0012422913 0.0000513563 0.0000413961 -0.0001684819 0.0000453998 -0.0013521652 0.0001638793 -0.0003172507 -0.0006796441 -0.0006511638 0.0000642331 -0.0006260348 -0.0001451045 -0.0014430819 0.0002583764 0.0008010216 0.0021387153 -0.0000377303 0.0000738019 0.0002323522 -0.0000437237 0.0000219237 -0.0002373952 0.0002127627 -0.0005256940 0.0008571935 0.0000403702 0.0000803530 -0.0008795872 -0.0001381501 0.0016152511 -0.0002621689 0.0001716242 -0.0003465810 -0.0003639821 0.0001773484 0.0016258623 0.0018160739 0.0006785038 -0.0009345727 0.0013784300 0.0004171941 0.0010835843 0.0001456170 -0.0007199235 -0.0007505161 0.0007325605 0.0010789062 0.0008913656 -0.0013463941 -0.0018451221 -0.0014630278 -0.0017297284 -0.0025617614 -0.0011501733 -0.0018790684 -0.0000700486 0.0004604469 0.0003665120 0.0006670491 0.0002306408 0.0005154246 0.0023775853 -0.0018521406 0.0015864153 0.0010504803 0.0000311852 0.0004572784 0.0036417276 -0.0005887557 0.0015324276 0.0006682457 0.0029023132 0.0000106957 -0.0010843643 -0.0002863371 -0.0005965646 0.0020283848 0.0028519525 0.0018608754 -0.0012915239 0.0004138242 -0.0006513291 0.0070298086 -0.0034701603 0.0017182452 -0.0054079605 0.0180980805 0.0084569474 0.0044522907 0.0234308917 0.0298439244 -0.0181665022 -0.0050952054 -0.0302479232 -0.0030766567 -0.0126877288 0.0003262010 -0.0342329364 0.0093304397 0.0277849712 -0.0382501953 0.0025526436 0.0101270118 0.0276797570 0.0257764172 -0.0118521526 -0.0966875963 -0.0668558180 0.0144054004 0.0920818174 0.0866747894 -0.1720838559 0.0567281512 0.0888673597 0.0232766497 -0.1166447009 0.1850263136 0.0166585628 -0.0447059733 -0.0840528403 0.0292880316 0.0108004431 -0.0977231426 0.0271316833 0.1656204925 0.1356701275 0.0185801349 -0.0267194507 0.1053732648 0.0325009383 0.0767203640 -0.0984492546 0.0094982307 -0.0602398712 0.1242870256 -0.1883081030 -0.1141905279 -0.0254097913 -0.0160365643 0.1011700237 -0.0595382772 -0.0147153409 0.0044408236 0.0220210371 -0.0223866980 -0.0038094689 0.0035634923 -0.0048377668 0.0067466438 0.0038752277 -0.0033561515 0.0011175007 -0.0088806420 0.0057350703 -0.0060807593 0.0056463064 -0.0053291010 0.0013909440 -0.0016128731 -0.0003832290 0.0012095178 -0.0016165223 -0.0006156830 -0.0033383560 0.0019479767 -0.0003886898 0.0031577243 -0.0011312252 0.0014222647 -0.0031978142 0.0029412706 -0.0013812569 0.0011720041 -0.0005176295 0.0008960849 0.0129065711 -0.0103757839 0.0098741881 -0.0139429581 0.0129834405 -0.0069100656 0.0188970902 -0.0109043742 0.0114939271 -0.0018293880 0.0003633478 -0.0019435120 0.0010519617 -0.0003705065 0.0013966366 -0.0054368713 0.0155224019 -0.0079072471 -0.0017088320 0.0024266461 -0.0001130762 -0.0016116787 0.0029119986 0.0009337541 0.0013182647 -0.0046579101 0.0004771553 0.0018131293 -0.0008310953 -0.0005434182 0.0005713975 -0.0027382731 0.0002531389 -0.0006490826 0.0026023561 -0.0009961670 -0.0152298272 0.0177698677 -0.0051321427 -0.0068370941 0.0123973100 -0.0030262155 -0.0093848107 0.0118798219 -0.0037511065 0.0091675554 -0.0107755964 0.0023451328 0.0095894363 -0.0135437733 0.0048471553 -0.0002932366 -0.0004632312 -0.0003563348 -0.0079515257 0.0091622445 -0.0004177559 0.0670359171 -0.0221987709 0.0021279366 0.0013534054 -0.0010635120 -0.0026375882 0.0035639187 0.0014860829 -0.0006979023 0.0014211424 0.0045093705 0.0026833643 -0.0003015709 -0.0005339337 -0.0000094999 0.0001747397 -0.0002866703 -0.0001150098 0.0005184082 -0.0006351058 -0.0002386249 -0.0002598559 -0.0006147694 -0.0001105524 -0.0017102033 -0.0034908122 -0.0030132886 -0.0034465697 0.0006504917 0.0031435150 0.0000331775 0.0002962238 -0.0004364868 0.0000940265 -0.0003827639 0.0008690058 -0.0003471155 0.0006257278 0.0004735606 0.0033210972 0.0023748224 0.0012337910 -0.0020995706 0.0017203803 0.0004999699 -0.0007986855 -0.0003738272 -0.0010123380 0.0017458399 -0.0007643992 -0.0015004737 -0.0006630222 0.0011845776 0.0008213090 -0.0001315917 0.0007940969 0.0007091690 0.0006736758 0.0016513800 0.0020151759 0.0009781826 0.0018413984 0.0007769375 -0.0060314199 0.0039168590 0.0090047431 -0.0650414166 -0.0047609225 0.0055315154 0.0077669793 0.0166215549 0.0269278255 0.0489911349 0.0381584362 0.0476283101 -0.0138465278 0.0013603258 -0.0018617507 0.0293569661 -0.0284803468 -0.0584591007 0.0018012290 -0.0106369211 -0.0162916274 0.0154570512 0.0382214205 0.0290097370 0.0730113368 0.0871222227 -0.0125007039 0.0100917288 -0.0008233611 -0.0014884850 0.0412365583 0.0370679748 -0.0803475390 0.0036386286 -0.0119428625 -0.0234686928 -0.0029329645 0.0153831212 0.0292119942 -0.0386920543 0.0485483620 0.0564926468 0.0143497967 -0.0031234918 -0.0016172537 -0.0388225929 -0.0149633361 -0.0638799328 -0.0050888326 -0.0079772213 -0.0177194608 -0.0026801704 0.0337990156 0.0334236068 -0.0608490036 0.1078195493 -0.0037286781 -0.0115321253 0.0024822084 -0.0009978649 -0.0312125179 0.0581348927 -0.0806073421 -0.0099876132 -0.0090595089 -0.0257928478 -0.0049419102 -0.0018693613 -0.0102458757 0.0014134012 0.0027273845 0.0125389333 0.0034451851 -0.0043196521 -0.0122118537 0.0012782746 0.0037174861 0.0140098665 0.0074132212 0.0042412973 -0.0420058928 -0.0944902163 0.0883503229 0.0973803504 -0.0154549240 -0.2212819358 0.0099063783 -0.0636649066 0.0695268840 0.0457060008 0.0505748109 -0.2464329279 -0.1597295779 -0.0505990421 0.0925129626 0.0165407839 -0.0077411715 -0.1047714002 -0.0104510676 0.1545892460 0.0785287896 -0.1006375255 -0.0514663775 -0.0889590354 0.0159175085 0.2162293242 0.0629489225 -0.0112995657 0.1144508175 0.0496403246 0.0972253926 -0.0046867622 0.0090659866 -0.0458980440 -0.0248887187 -0.1042012739 -0.0126355153 -0.1194249089 0.1245813988 -0.0967203610 0.0177954401 -0.1037377630 0.0166376741 -0.1852150000 0.1310127929 0.0030128770 -0.0558748440 -0.2133983203 0.0065478320 0.0821459616 0.0459993895 0.0474844000 -0.1231935980 -0.2123432104 -0.1688374546 0.0816333197 0.0746360508 0.0083590567 0.0018940437 -0.0017895208 0.0029696513 -0.0049111126 0.0033619757 -0.0057892354 0.0080451610 0.0126302561 0.0143213449 -0.0019767481 0.0032237386 -0.0082757901 -0.0010552168 -0.0030891104 -0.0038523239 0.0021047899 0.0094706597 0.0075820954 -0.0243908869 -0.0074270949 0.0114800501 0.0141282857 0.0089480847 0.0023658385 -0.0006410715 -0.0008394505 0.0003938011 0.0028048150 -0.0010972198 0.0006873481 -0.0001904483 -0.0003932472 -0.0003756326 0.0025512928 -0.0026953541 -0.0020534819 0.0012832240 -0.0001288442 -0.0005272682 0.0015155464 0.0013477983 0.0002190237 0.0010886698 -0.0006115340 0.0018526986 0.0002513924 -0.0014109661 -0.0001799023 -0.0018860048 0.0028406567 -0.0005644662 0.0043680220 -0.0019880246 0.0026406895 -0.0012997973 -0.0002915957 -0.0005024526 -0.0022998431 0.0022388344 0.0014160697 0.0014573963 0.0011052090 0.0015619933 -0.0001158376 0.0005153392 -0.0004884903 -0.0018429182 -0.0050728785 -0.0031251512 -0.0167666740 0.0864969121 -0.0461463583 0.0003656101 0.0001973757 -0.0001848001 0.0002181504 0.0002171860 0.0000590653 -0.0001071575 0.0031385480 0.0028505862 0.0004470752 0.0024346832 -0.0066651669 -0.0012191281 -0.0061370500 0.0009080340 -0.0024447397 0.0005258250 -0.0015966945 0.0022696816 -0.0021987510 0.0017721285 0.0146042631 -0.0136597303 0.0003427713 -0.0163396932 0.0062128816 -0.0092499751 0.0117462733 -0.0088807951 0.0069776084 -0.0006181282 -0.0005568284 0.0079616457 -0.0044532951 -0.0036460613 -0.0081288853 -0.0167256698 0.0395992272 -0.0505074661 0.0025219158 -0.0066475481 -0.0032479808 0.0016298607 -0.0029196298 -0.0004360279 -0.0036216811 0.0031003008 -0.0004969460 0.0003347217 0.0067495098 -0.0010478877 0.0031883692 0.0022122504 0.0019753245 -0.0022904096 -0.0013552136 0.0036280963 0.0127962013 -0.0194224777 0.0053899624 0.0232511579 -0.0081796615 0.0156972337 0.0022791102 0.0007479103 0.0071052159 -0.0017147092 0.0017795747 0.0064247921 -0.0104044389 0.0163157470 -0.0049192182 0.0006664817 -0.0018822956 0.0014148789 -0.0653549654 0.0643189602 -0.0031462045 -0.0021899164 0.0010176297 -0.0002203479 -0.0159640568 -0.0291222680 -0.0334793700 0.0234009169 0.0167066186 -0.0006164110 0.0116496838 0.0333130299 0.0197075536 -0.0023047072 -0.0087909736 -0.0031650254 0.0005190616 0.0007127422 0.0016505522 0.0018536567 -0.0007175015 0.0013193316 -0.0003940853 -0.0013444620 0.0007632259 -0.0137797016 -0.0298675366 -0.0263989172 -0.0283184125 0.0049085056 0.0250155953 -0.0015298483 -0.0055701565 0.0038479742 0.0052921261 0.0008526924 -0.0157884036 0.0002129028 -0.0052446874 0.0052524147 0.0046388424 0.0016418615 0.0012192532 -0.0010954776 0.0028694481 0.0026471462 -0.0045278790 0.0011211838 0.0008251252 -0.0004307289 -0.0008223608 -0.0018169925 -0.0011712980 0.0022295707 0.0015544569 -0.0047900985 0.0028558238 0.0033324408 0.0118419745 0.0141796377 0.0115816547 0.0131903147 0.0147358146 0.0022861282 -0.0513442394 0.0345799906 0.0781887876 -0.0009377720 -0.0001799341 0.0000974883 0.0001666097 -0.0002673970 0.0003059733 0.0002175901 0.0008124663 -0.0000632829 -0.0002148531 -0.0001805065 0.0001088118 0.0005305169 -0.0003883530 -0.0002977810 0.0000778829 0.0000920802 -0.0001789923 -0.0000366461 0.0018066749 -0.0003286265 0.0027941615 -0.0027655933 0.0009689799 -0.0002046112 0.0001967974 0.0001180368 0.0005014447 0.0022319992 -0.0012502929 0.0004237311 -0.0002849179 -0.0001234023 0.0001581142 -0.0003511584 -0.0000194345 0.0011410500 -0.0016355454 -0.0021696893 -0.0005629675 -0.0001487897 0.0001506423 0.0010941328 0.0002858658 0.0024605818 0.0002483076 0.0001177348 -0.0001750949 0.0001509230 0.0002070897 -0.0002327087 0.0010511308 -0.0021815895 -0.0019509834 0.0002694770 0.0003374619 0.0002809883 0.0005708635 0.0004457174 0.0028486613 -0.0011157452 -0.0021462065 0.0013685395 0.0001544956 -0.0000034778 0.0003971332 -0.0001005842 -0.0002323633 -0.0004356782 -0.0001626613 0.0000996477 0.0001122234 -0.0000314752 -0.0003111395 -0.0003265634 0.0003449483 0.0003860704 0.0000531823 0.0024531810 -0.0022869677 -0.0016168985 0.0004051520 0.0033936908 0.0001881364 0.0006526917 -0.0005312785 -0.0006346336 -0.0017158090 0.0040437656 0.0009709153 0.0012615907 -0.0003439569 0.0002727020 -0.0004474145 0.0005337417 0.0004418188 -0.0030039883 -0.0011632878 0.0015698840 -0.0013656228 0.0005473671 -0.0001415261 -0.0030051365 -0.0002457072 0.0024938203 0.0013306493 0.0005652482 0.0002880627 0.0002807350 -0.0007455612 0.0005451561 -0.0002965654 0.0014687262 -0.0002697728 -0.0006850478 0.0001553607 -0.0001753660 -0.0018707570 0.0017342334 -0.0006522755 -0.0006647996 -0.0010899866 -0.0019947528 0.0001331302 0.0000189511 -0.0002185588 -0.0003909501 -0.0004319924 -0.0001187689 -0.0006140229 0.0000467236 0.0008957231 0.0000289816 -0.0014241101 -0.0000558948 -0.0163644931 -0.0169158883 0.0985182016 -0.1149654882 -0.0990974780 -0.3308377253 0.2666638520 0.2119087736 0.1844386452 0.1539760296 0.2053223135 0.0583540292 0.0158953465 -0.0119665312 -0.1097907088 0.2937074279 0.2530977586 0.0880627889 -0.4466169236 -0.1925985946 0.2513896099 0.2955225371 0.1483782975 0.1116879214 -0.0027129300 -0.0007599391 -0.0015809077 -0.0039928655 0.0024889201 -0.0089622280 0.0001075405 0.0012215495 0.0023053010 -0.0001712822 0.0005184122 -0.0009781031 0.0003814570 -0.0018694064 0.0004212398 0.0009599190 0.0000301963 0.0004449469 0.0024377927 0.0014738320 0.0010331944 -0.0001505786 0.0000714426 0.0001295237 -0.0003595550 0.0005561416 -0.0002552862 0.0016975401 -0.0000809282 -0.0001565722 -0.0018431262 -0.0006315521 -0.0003974368 0.0005511380 -0.0002591141 0.0007128710 0.0006853976 0.0008970828 -0.0000977274 -0.0004843582 0.0011320253 0.0009090060 -0.0010306020 -0.0024515273 -0.0018547883 0.0059517737 0.0329555346 -0.0161189931 0.1986292277 -0.1893070893 0.1414589999 -0.0416337673 0.0367492137 -0.0134403917 -0.0230088016 0.0209728048 -0.0065403216 0.0606492308 -0.0543147243 0.0293962376 -0.0478420615 0.0444539282 -0.0252563740 0.0822676550 -0.0703068114 0.0399782062 -0.0215788041 0.0195143736 -0.0134283693 -0.3259100441 0.2632276312 -0.2064949340 0.2829287415 -0.2283041466 0.1682334757 -0.5257773429 0.3366170481 -0.3081307759 0.0081671323 -0.0026666289 0.0127205539 -0.0029583038 -0.0105776638 -0.0147842167 0.0011530773 -0.0093006735 -0.0294538742 -0.0001946211 -0.0054892695 -0.0096224415 -0.0005803105 -0.0024195862 -0.0037330096 0.0005274141 0.0029799735 0.0016310382 0.0025317465 0.0032482307 0.0010709440 0.0084238571 0.0081520752 0.0055031339 -0.0062508951 -0.0041920514 0.0070361800 0.0031779208 -0.0028229887 0.0051988736 0.0083233710 0.0018152480 0.0062656615 0.0079095029 0.0034068179 0.0167759431 -0.0091750255 0.0030735292 0.0084222739 -0.0080308580 0.0014830632 -0.0042037950 0.0071900902 -0.0024516329 0.0032776258 -0.0058602635 -0.0060369275 0.0093956888 -0.0004411103 0.0001152538 -0.0000073263 -0.0018063182 -0.0013737469 0.0007346621 -0.0016079232 0.0011976943 0.0012132385 0.0001831986 -0.0006211098 -0.0005119673 -0.0004649038 -0.0006685329 -0.0004928631 0.0003355378 0.0005566388 0.0003063670 0.0002628043 0.0005459631 0.0003227400 0.0003912994 0.0005104896 0.0003083291 0.0003968869 0.0000987779 0.0001191790 0.0003377667 -0.0001518010 -0.0004713167 -0.0004585275 -0.0012486626 0.0002986001 -0.0005548246 0.0006961614 -0.0027369849 0.0001055873 -0.0017739059 0.0020095176 -0.0009807053 -0.0007896849 -0.0001471451 0.0007120646 -0.0010444961 -0.0001887213 0.0023670607 -0.0001195872 0.0005919764 -0.0023399414 0.0008856495 0.0013231867 0.0010084384 -0.0013367260 -0.0012880452 -0.0008345183 -0.0005898492 -0.0003560694 0.0011414251 -0.0001028805 -0.0013821334 0.0013631567 -0.0003965345 -0.0011311800 0.0002630816 0.0000708966 -0.0002404773 0.0012029176 -0.0021453852 0.0022381748 -0.0026580955 0.0091609979 -0.0021977590 0.0037255360 -0.0024387618 0.0060774054 0.0028030312 0.0017854388 -0.0021127223 0.0007466038 -0.0035221824 -0.0041482841 -0.0018075777 -0.0011535078 -0.0019175960 0.0212965891 -0.0410901710 0.0240819623 -0.0248352262 0.0235484110 0.0074550658 0.0026566000 0.0001738256 -0.0020328356 -0.0051314242 0.0014505592 -0.0091207980 -0.0058196562 -0.0029703260 0.0029520559 0.0000775753 0.0000054197 -0.0000996529 0.0001657413 -0.0003437575 -0.0003193125 -0.0001298827 0.0001024780 -0.0000368288 0.0001669122 -0.0000194979 0.0004321265 0.0001354653 0.0001420971 0.0000024235 -0.0002140163 -0.0004399081 0.0000518639 0.0005826181 -0.0003373838 -0.0001227228 0.0000180045 -0.0000669881 0.0000579645 0.0005144867 0.0000945895 0.0002578705 -0.0003267337 -0.0007461256 0.0006222944 -0.0021440816 -0.0010886603 -0.0035977294 -0.0000901667 0.0001792178 0.0057053438 0.0000086842 0.0000342852 -0.0000015174 0.0000181091 0.0000047507 -0.0000377756 -0.0007688991 0.0001212715 -0.0005534321 0.0003319750 -0.0000215676 0.0005416421 0.0001378975 -0.0007680668 -0.0000273879 0.0004855800 -0.0000948601 0.0001694988 0.0007817629 -0.0009646330 0.0002272412 -0.0003117237 0.0010459453 -0.0028559364 -0.0002766690 -0.0001308104 -0.0002552739 -0.0000585082 0.0002485579 -0.0000821634 0.0007740221 -0.0002845210 0.0011688532 0.0003827105 0.0009001300 0.0011141247 0.0020452022 0.0010137982 0.0012574289 0.0000830019 -0.0003297937 -0.0001424175 -0.0004144783 -0.0003205557 -0.0002245921 -0.0016230562 0.0013782266 -0.0011303179 -0.0008892773 -0.0001544541 -0.0006366260 -0.0024039827 0.0007608382 -0.0009326793 -0.0005570379 -0.0023345954 -0.0000344677 0.0006937306 0.0002842890 0.0003679221 -0.0015911174 -0.0023165140 -0.0015202270 0.0005831183 0.0002505508 0.0004197900 -0.0022612936 0.0032011931 0.0029007224 0.0024115081 -0.0102556814 -0.0094983899 0.0012095924 -0.0077555222 -0.0096963730 0.0144146681 0.0094872802 0.0163130393 0.0023387498 -0.0005464125 -0.0030314998 0.0047628425 0.0054496954 0.0022361899 -0.0084008841 -0.0018547679 0.0038003347 0.0132470248 0.0086194316 0.0004904410 -0.0029715700 -0.0029119510 0.0008925348 0.0079655230 -0.0018132765 -0.0030204259 0.0006073998 -0.0002050428 -0.0003140434 0.0046192816 -0.0045721371 -0.0049099124 0.0020911327 -0.0009158976 -0.0001555814 0.0034401229 0.0016410079 0.0005905124 0.0050089509 0.0003736966 0.0048903008 0.0002110678 -0.0017274807 -0.0002869157 -0.0037055880 0.0057199065 -0.0008170600 0.0089110723 -0.0028722461 0.0047682195 -0.0056781393 -0.0015981086 -0.0013245094 -0.0053767686 0.0050030145 0.0012933174 0.0047512807 0.0027397671 0.0035790851 -0.0007314163 0.0023197230 0.0009340009 -0.0042575800 -0.0101539184 -0.0066982074 -0.0315639739 0.1612819625 -0.0991432610 0.0070262726 -0.0046441625 -0.0000169146 -0.0003928645 0.0004227964 -0.0029106877 0.0025448024 0.0024967221 0.0049608040 0.0057133620 -0.0004796411 -0.0068288880 -0.0049801434 -0.0069912332 0.0001095484 -0.0000689182 -0.0008988883 -0.0001972181 0.0003312483 0.0021271113 0.0008314835 0.0008399619 0.0040054373 -0.0101550025 -0.0086654457 -0.0043910741 0.0001575564 0.0011156887 0.0091017521 0.0042698057 -0.0057950792 -0.0076076207 0.0143200723 0.0020277603 0.0041145463 -0.0148364881 -0.0548836669 0.1671540039 -0.1401170103 0.0086920914 -0.0139672323 -0.0029892697 0.0054678089 -0.0043314124 0.0070844834 -0.0182946810 0.0070414504 -0.0048432344 0.0055319844 0.0125822656 -0.0058308993 -0.0025599302 0.0083987354 0.0008488128 0.0023619958 -0.0083891089 0.0076412946 0.0418568107 -0.0752007304 0.0160273301 0.0436272991 -0.0128142265 0.0218616458 0.0302312527 -0.0434174176 0.0216211738 -0.0277424203 0.0431434378 0.0047343032 -0.0203290742 0.0448603937 -0.0043860715 -0.0007232536 -0.0039087186 0.0024317714 -0.0397302539 0.0548759445 -0.0050588744 -0.0036744970 0.0025124107 -0.0008558163 0.0683196360 0.0175601137 -0.0595962314 0.0764890114 0.0441293172 0.0061443906 0.0415363670 0.1222417759 0.0645603165 -0.0068485670 -0.0257832439 -0.0065727795 -0.0012965170 0.0000443309 0.0027693376 0.0006657957 -0.0053758678 0.0028629532 -0.0013453563 -0.0064710399 0.0006185737 -0.0301912498 -0.0877051448 -0.0822644598 -0.0888891071 0.0167653203 0.0799881917 0.0002520110 -0.0038131780 0.0044208875 0.0032566183 -0.0002999828 -0.0107308883 0.0009471596 -0.0016379153 -0.0030819402 0.0106572343 0.0065022202 0.0035325440 0.0193885856 0.0066188694 0.0077623339 -0.0111770359 -0.0020807419 -0.0067328099 0.0056950873 -0.0058580582 -0.0103024621 -0.0050972093 0.0106026420 0.0063307091 -0.0114240599 0.0105480842 0.0109761476 0.0359190366 0.0451210143 0.0401961813 0.0459231261 0.0423680239 0.0048005750 -0.1536099286 0.1003352635 0.2369864225 -0.0031136684 -0.0003758297 0.0003869790 0.0007532426 -0.0008916260 0.0013829954 0.0013465019 0.0023980715 0.0011090648 -0.0003598655 -0.0000316716 -0.0000443337 0.0016556008 -0.0018144678 -0.0019463073 -0.0002013305 0.0004196058 -0.0008129202 -0.0014995439 0.0086901315 -0.0023739058 0.0038286671 -0.0018638340 0.0030469879 0.0002092345 0.0003488631 0.0002616694 -0.0000921954 0.0053815735 -0.0054337663 0.0015251234 -0.0033000172 0.0011977819 -0.0010986355 -0.0021707785 -0.0001813095 0.0030746191 -0.0020248554 -0.0049425523 -0.0003860223 -0.0012566272 0.0007314095 0.0034948405 0.0025449424 0.0040497370 -0.0007789151 -0.0010827353 0.0012937927 0.0058156908 0.0082993054 -0.0049725409 -0.0037203176 -0.0109083068 -0.0011170944 0.0010309879 0.0011640274 0.0002049744 -0.0055263745 -0.0073860386 0.0104296573 0.0040738623 0.0063473810 -0.0028390062 -0.0000675175 -0.0000932921 -0.0000334149 -0.0002258353 -0.0004053232 0.0001166266 -0.0005748757 0.0001881155 0.0012983363 -0.0002485537 -0.0010314977 -0.0015358188 0.0009449187 0.0009639470 -0.0006196538 0.0049563001 -0.0047698837 -0.0029064574 0.0008813274 0.0058172108 0.0007669549 0.0006535362 -0.0003687023 -0.0008852453 -0.0037671426 0.0071687306 -0.0003204932 0.0022294972 0.0003154023 0.0010095293 -0.0009099816 0.0000325680 0.0010256053 -0.0055867212 -0.0020042494 0.0024626615 -0.0045241647 0.0003830700 -0.0010240290 -0.0041322659 -0.0004168772 0.0067670266 0.0052592173 0.0022155080 0.0023638901 0.0006331375 -0.0014500753 0.0008263225 -0.0007581059 0.0019338699 -0.0011561298 -0.0037490983 0.0025029032 -0.0016332547 -0.0049735346 0.0027631525 0.0011008944 -0.0031045292 -0.0002047444 -0.0067371505 -0.0002859958 -0.0032488135 -0.0008362138 -0.0000486064 -0.0005855426 0.0006413380 -0.0040404521 -0.0031101054 0.0018433746 0.0022927143 -0.0031415193 -0.0017752750 0.0969641093 0.0004794681 -0.0553970308 0.0900793746 0.2679574808 0.4313859102 -0.1977684497 -0.0007133339 0.0943167839 -0.2590489658 -0.2190499392 -0.2651379068 -0.0700575055 -0.0926399153 0.0178124435 -0.3081204559 -0.0582768066 0.1009588010 -0.2494060046 0.0003904972 0.0601455104 0.0701632083 0.0928111584 -0.0546024929 0.0143711995 0.0096912364 0.0056133731 0.0389067620 -0.0110348267 0.1545403589 -0.0150103756 0.0058006899 -0.0294508673 -0.0188183561 0.0177332408 0.0075004417 -0.0015913904 -0.0002785607 -0.0006046984 -0.0017289760 -0.0012409212 0.0017809654 -0.0200775946 -0.0054875335 -0.0118425902 -0.0065858106 0.0016870845 0.0075106512 0.0119932354 -0.0191581251 0.0007517826 -0.0201444905 0.0070029409 -0.0566866606 0.0210813067 0.0080317997 0.0012661524 0.0174335456 -0.0137936627 -0.0003773942 -0.0050795784 0.0001393509 -0.0008836122 -0.0019335565 0.0026342568 0.0011983515 -0.0014684648 -0.0017444684 -0.0004647821 -0.0024347946 0.0103758225 -0.0073937633 -0.0019686530 0.0011678838 -0.0010280019 0.0001960221 -0.0004277914 0.0000639165 -0.0001322962 0.0003107283 0.0001703239 0.0001166044 -0.0000142248 -0.0003941057 -0.0005144866 0.0001518867 -0.0000940858 0.0002651679 -0.0004139321 0.0002066676 -0.0000372781 0.0000057551 0.0000757502 0.0002606315 -0.0006273541 -0.0004749996 0.0015860494 -0.0016110150 0.0015330643 -0.0017172769 0.0000643784 -0.0011167170 0.0005627496 -0.0006091183 0.0008420228 -0.0001106708 0.0006260190 -0.0005652152 0.0022008687 -0.0055506442 0.0038415151 0.0004937390 -0.0004260788 -0.0003978741 0.0000681621 -0.0009326566 -0.0027579947 0.0024417946 0.0028774762 0.0008275809 -0.0025787247 -0.0017184825 0.0018988218 0.0005815746 0.0013559438 -0.0000234319 -0.0007783961 -0.0011340302 0.0008049356 0.0057604077 -0.0003539106 0.0001412047 -0.0054232674 -0.0024407206 -0.0010231016 0.0035602885 -0.0029305247 0.0006925644 -0.0037301005 0.0013185397 -0.0013008567 -0.0003780554 0.0008212180 -0.0032765620 0.0006152702 0.0002779583 0.0007232760 -0.0073030803 0.0049774659 -0.0004346348 0.0135918118 -0.0075071084 0.0017399517 0.0008945444 0.0000436999 -0.0014855947 0.0011123099 0.0011107197 0.0007549931 0.0009475010 0.0026096661 0.0011805418 -0.0003114112 -0.0009628846 -0.0000221880 0.0001111761 0.0003109835 0.0000439432 0.0004013847 0.0000589619 -0.0001691366 -0.0000039138 0.0001260672 -0.0001183572 -0.0003595737 -0.0018617217 -0.0019368220 -0.0019218583 0.0003429127 0.0016855718 -0.0002217575 -0.0003424705 -0.0000560524 -0.0000840417 0.0003813382 -0.0018760077 0.0000438296 -0.0007541541 0.0006658004 0.0009056427 0.0003322127 0.0007386440 -0.0019850359 0.0001003002 -0.0001567817 0.0010184261 -0.0002017061 0.0004238341 -0.0005257948 0.0000603803 0.0005703020 -0.0002630070 -0.0001314381 0.0004343401 0.0002330279 -0.0003310703 -0.0003279922 0.0013379906 0.0010219340 0.0004197197 0.0016017332 0.0008914919 -0.0003114761 -0.0033451832 0.0022501441 0.0053226855 0.0108164382 0.0041837605 -0.0020358183 -0.0015037587 -0.0008624687 -0.0020531322 -0.0078279597 -0.0107002151 -0.0069595643 0.0006051027 0.0028139029 -0.0009927598 -0.0007226965 -0.0012319795 0.0132764796 -0.0031314788 0.0037269266 -0.0036432341 0.0044810316 -0.0039271813 0.0006305317 -0.0215258703 0.0084679004 -0.0135811056 -0.0000895740 -0.0018499101 0.0005019199 -0.0123594783 0.0385428090 -0.0054842788 0.0121275243 -0.0275138151 0.0147911036 -0.0005792406 0.0018336184 0.0016304888 -0.0076711074 0.0100949543 0.0119422039 0.0027349971 -0.0003993864 -0.0004672331 -0.0090206008 -0.0049008189 -0.0126097306 0.0009377366 0.0026015600 -0.0011010418 -0.0019814158 0.0009704436 0.0035110282 -0.0084234406 0.0193705499 0.0043759924 -0.0013500725 -0.0000900043 0.0000091737 0.0036293392 0.0155569477 -0.0226557902 -0.0092678988 -0.0121448549 0.0064458334 0.0002723886 0.0005577751 0.0011637963 -0.0001536463 0.0001156831 -0.0014341081 0.0004873295 -0.0005033734 -0.0015509035 0.0001318764 0.0005982404 0.0018246223 0.0105478107 -0.0077712807 0.0279358497 -0.0075363245 0.0152619531 0.0265161433 -0.0493387091 -0.0090939678 -0.0916629812 0.0349803189 0.0048832852 0.0777596115 0.2975798515 -0.0802756457 0.4661374033 -0.2370354678 0.0587126004 -0.4054700340 -0.0376370960 -0.0019596991 -0.0720621322 0.0361325464 0.0007893847 0.0350808689 0.2998460416 -0.0561718379 0.3757723944 -0.1352362133 0.0211001096 -0.2546492076 -0.0168577356 -0.0097988217 -0.0155017927 0.0004687175 0.0052162963 -0.0095717628 -0.0075616756 -0.0008176424 0.0215900979 0.0172530659 -0.0095745883 -0.0045601372 0.0967159607 -0.0155387553 -0.1052267286 -0.0262825791 0.0017057423 0.0780710203 -0.0101215090 0.0153729447 0.0269789065 0.0095101969 -0.0025733932 -0.0231408950 0.0926925364 0.0074170127 -0.1293418929 -0.0712161517 0.0076182582 0.1194273401 0.0013980645 0.0006685299 -0.0002972272 0.0023289962 0.0032174294 0.0066746116 -0.0022744848 -0.0006935381 0.0002339521 -0.0019328486 -0.0022280603 -0.0011560648 -0.0009980041 -0.0015217110 -0.0009816965 0.0003619889 0.0019012259 0.0021124015 -0.0093825305 -0.0019301799 0.0038763869 0.0031839751 0.0021839091 0.0002013768 0.0170046428 0.0155504672 -0.0061415806 -0.0611658710 0.0106324353 -0.0253950694 0.0004294052 -0.0044976266 0.0100607461 -0.0137223210 0.0065439489 0.0153638704 -0.0022014478 0.0027940727 -0.0026243526 -0.0004743956 0.0020727907 0.0006328638 -0.0201832307 -0.0126197081 -0.0068876574 -0.0141240595 -0.0031342339 0.0255915536 0.0062314807 -0.0084150404 -0.0054270535 0.0390596986 0.0026075502 -0.1314130363 0.0180822357 0.0066809901 0.0005044335 0.0152914617 -0.0123097870 -0.0007833732 -0.0044129989 -0.0003120593 0.0000093081 -0.0015224526 0.0023371848 0.0007657297 -0.0015763397 -0.0015089062 -0.0008168937 -0.0018237989 0.0079932339 -0.0056260596 0.0045235164 -0.0039785576 0.0026909488 -0.0008884521 0.0005995509 -0.0004212934 -0.0003752535 0.0004750531 0.0000826058 0.0008398388 -0.0004310488 -0.0000060542 -0.0000875318 -0.0005179405 0.0001302979 0.0002946278 -0.0002181547 0.0000373617 -0.0001494615 -0.0000972297 0.0000090394 -0.0031586912 0.0027199416 -0.0025195178 -0.0014015457 0.0005396997 -0.0004554884 -0.0019921696 0.0013947713 -0.0012705319 0.0006106268 -0.0004968104 0.0008022812 -0.0001562554 0.0004744870 -0.0005772598 0.0021250150 -0.0056373491 0.0037559240 0.0004318314 -0.0005155278 -0.0004981339 0.0000718358 -0.0012967044 -0.0037331585 0.0032072227 0.0034667118 0.0011668461 -0.0033528769 -0.0018428015 0.0024724809 0.0007497070 0.0012252018 0.0001336780 -0.0008195118 -0.0010347801 0.0008532253 0.0067709648 -0.0001346701 0.0007149167 -0.0051582406 -0.0045058165 -0.0003613409 0.0026316089 -0.0018890428 0.0010841764 -0.0034200430 0.0010286266 -0.0011425730 -0.0006591273 0.0008636802 -0.0043936455 0.0004442551 0.0002627873 0.0005981234 -0.0041723288 0.0023585736 -0.0003161947 0.0073493098 -0.0032993491 -0.0003889802 0.0006128649 -0.0000217140 -0.0010802001 0.0006882542 0.0008519060 0.0007005076 0.0007015636 0.0019174884 0.0008252970 -0.0002351623 -0.0008024920 -0.0000409655 0.0000800991 0.0002793551 0.0000490791 0.0003896026 0.0002330731 -0.0001136868 0.0000107484 0.0001435094 -0.0000791921 -0.0001950586 -0.0013856495 -0.0014747550 -0.0014510481 0.0002655270 0.0012473735 -0.0002155850 -0.0002247992 -0.0000633500 -0.0000570199 0.0003517294 -0.0016814605 0.0000880195 -0.0008624259 0.0005774477 0.0000751518 -0.0003555679 0.0004543952 -0.0017754613 -0.0002235363 -0.0002754180 0.0012950578 -0.0002239109 0.0005683022 -0.0006001176 0.0001131915 0.0005791221 -0.0001715738 -0.0001679201 0.0003003348 0.0001128704 -0.0002608459 -0.0002662620 0.0010935645 0.0007818895 0.0002128546 0.0013519973 0.0006287945 -0.0003505940 -0.0024906743 0.0016759332 0.0040064578 0.0148906643 0.0039979393 -0.0037291490 0.0000869090 -0.0041179778 -0.0009912212 -0.0112812561 -0.0039714800 -0.0117497067 0.0039801329 -0.0034935868 0.0021335613 -0.0112647939 0.0157084891 0.0072776020 0.0043025961 -0.0088427759 0.0070537786 -0.0126027746 0.0073175378 -0.0111511854 -0.0006911638 -0.0414909732 0.0119761259 -0.0017919708 0.0025825737 -0.0003594693 0.0131431075 -0.0625521830 0.0472439106 -0.0269038962 0.0558976705 -0.0286391907 -0.0046048030 -0.0043993659 0.0034366120 0.0007650187 0.0130057438 0.0033583541 -0.0012181006 -0.0043724182 0.0014728150 0.0025073448 0.0049467454 -0.0104752708 -0.0046766290 -0.0041230680 0.0046725988 0.0252136573 0.0266429134 -0.0139588827 -0.0362661292 -0.0308352771 0.0237600740 0.0008479236 0.0025865642 -0.0007991771 -0.0258418462 -0.0459953983 0.0101178154 0.0219510852 0.0309165506 -0.0147695004 0.0010413148 -0.0001827345 0.0012151007 -0.0003881497 -0.0009803824 -0.0017423368 -0.0001868264 -0.0007346189 -0.0009046466 -0.0001846437 -0.0002074130 0.0011924775 -0.0094106412 -0.0015323086 -0.0052885810 -0.0174595626 0.0143455706 0.0029436869 0.0153596294 -0.0147796958 0.0305601450 -0.0138681285 -0.0033090064 -0.0277074109 -0.0975147134 0.0070921556 -0.1686864921 0.0837705720 -0.0274030715 0.1507537277 0.0180551928 0.0051362787 0.0217241091 0.0067514178 0.0061857623 -0.0181518049 -0.0749228378 0.0207639895 -0.1247609074 0.0527461114 -0.0042978555 0.0536271714 -0.0106708525 -0.0112794883 -0.0253478563 0.0107960220 0.0040840263 -0.0252181266 -0.0309400762 0.0140528688 0.0658981329 0.0258621439 -0.0097519245 -0.0237943650 0.2820384571 -0.0265556862 -0.3433395808 -0.0945418748 0.0104656757 0.1860799588 -0.0426124999 0.0219733702 0.0922733492 0.0341947069 -0.0155330144 -0.0854181718 0.3062217481 -0.0065706244 -0.4666598800 -0.2617523853 0.0079814900 0.4456975975 0.0008778925 0.0008379245 -0.0002519935 0.0023361872 0.0018665850 0.0053007155 -0.0020731928 -0.0017011760 -0.0012811404 -0.0006578971 -0.0015079380 0.0006203175 -0.0005820928 -0.0011723127 -0.0008405249 -0.0000250934 0.0015129307 0.0016680212 -0.0073599233 -0.0013645236 0.0030207403 0.0029552396 0.0019561749 0.0001046903 0.0416540288 0.0341601969 -0.0057307004 -0.0997840429 0.0178697510 0.0298324406 -0.0053001554 -0.0033827554 0.0036484927 -0.0421583275 0.0378403477 0.0519311219 -0.0094124201 0.0011269088 -0.0101407607 -0.0083532016 0.0046765229 0.0109224555 -0.0539266892 -0.0216918051 -0.0524507939 -0.0016047690 0.0043189761 -0.0013735818 0.0303906039 -0.0436277912 -0.0005416196 -0.0905370227 0.0138513287 -0.0320531226 0.0597034859 0.0206273395 0.0027340648 0.0497027097 -0.0385694689 -0.0004444308 -0.0147442146 -0.0002251290 -0.0021785632 -0.0051118093 0.0061098068 0.0023214310 -0.0036335367 -0.0031354922 -0.0004489253 -0.0061004341 0.0237932917 -0.0161670269 0.0158591633 -0.0136755651 0.0092809671 -0.0030418771 0.0021415788 -0.0015223983 -0.0013102586 0.0015933619 -0.0000130743 0.0025786302 -0.0015169609 0.0004804921 0.0002643752 -0.0017259770 0.0005007178 0.0006100746 -0.0006603677 0.0000835073 -0.0004388769 -0.0005738485 0.0000142177 -0.0117275515 0.0100060781 -0.0083509767 -0.0065192477 0.0037957670 -0.0028396177 -0.0055361963 0.0028983807 -0.0036540031 0.0022915467 -0.0013930073 0.0023254594 -0.0006697098 0.0014097359 -0.0017205473 0.0078468322 -0.0217341024 0.0150194855 0.0013849960 -0.0016885568 -0.0017283066 -0.0000037060 -0.0045218655 -0.0139896752 0.0114868830 0.0130680647 0.0042761945 -0.0121746926 -0.0069086284 0.0091873848 0.0022917608 0.0045365521 0.0005063802 -0.0021893529 -0.0042382388 0.0029446040 0.0260438225 -0.0026040745 0.0040051024 -0.0192650495 -0.0158222294 -0.0013906711 0.0102535690 -0.0086688863 0.0047325859 -0.0141898008 0.0074778540 -0.0048123592 -0.0014674342 0.0006799099 -0.0157824285 0.0016595254 0.0011690382 0.0017614678 -0.0150680141 0.0055577253 -0.0006454952 0.0178111892 -0.0314463969 0.0131447476 0.0027719015 -0.0000330484 -0.0040460667 0.0027919924 0.0035499964 0.0027554607 0.0028805969 0.0074404202 0.0032544629 -0.0010097785 -0.0026934040 -0.0000513749 0.0003413124 0.0009356140 0.0001590182 0.0010524884 -0.0007407915 -0.0005803623 -0.0000519510 0.0003716916 -0.0003798502 -0.0008482232 -0.0052980533 -0.0056148983 -0.0055386604 0.0009041956 0.0047061745 -0.0004493102 -0.0018267512 0.0003729623 -0.0003118212 0.0011114654 -0.0054959987 -0.0001133411 -0.0010876030 0.0018905123 0.0054893378 0.0035205035 0.0028731777 -0.0049333664 0.0021262041 0.0003648317 -0.0004658943 0.0001420303 0.0007983359 -0.0014905315 0.0001288348 0.0017487149 -0.0008414720 -0.0003663997 0.0013122404 0.0010502076 -0.0012225635 -0.0011542377 0.0044017145 0.0029752581 0.0008369799 0.0051721110 0.0025374602 -0.0013598956 -0.0097759768 0.0066161822 0.0156052710 0.0313971624 0.0156671613 -0.0118189741 0.0011418393 -0.0128084736 -0.0032923674 -0.0273574239 -0.0054214733 -0.0255799746 0.0101760014 -0.0123172431 0.0081194418 -0.0325737944 0.0518409262 0.0043741841 0.0190291368 -0.0376673954 0.0266207028 -0.0365020140 0.0263953358 -0.0343645204 -0.0001615379 -0.1091538667 0.0426352754 -0.0044417104 0.0086659522 -0.0016506760 0.0672529345 -0.2405854155 0.1561553311 -0.1098274201 0.2250782023 -0.1186753339 0.0197549787 0.0318473893 -0.0078002771 -0.0410131113 -0.0146832820 0.0363591142 0.0199720636 0.0244357114 -0.0137854970 -0.0676051380 -0.0703844119 0.0087795966 0.0475526808 0.0586602448 -0.0354245584 -0.1296530740 -0.1324621112 0.0850876021 0.1233685725 0.2354138506 -0.0989609698 -0.0108185170 -0.0161749323 0.0052629794 0.2453360341 0.4192706850 -0.2168653911 -0.2440981660 -0.3354153583 0.1811673349 0.0028764929 -0.0009511257 0.0018544171 -0.0010154098 -0.0028564564 -0.0036620533 0.0039073608 0.0018409748 -0.0012819551 0.0014965652 0.0044076344 0.0018743820 -0.0136607076 -0.0053375174 0.0040033212 -0.0526433025 0.0494512368 0.0256666738 0.0014733210 -0.0545635762 0.0131159527 -0.0113757926 -0.0045595548 -0.0121648225 -0.0406600750 -0.0495675415 -0.0955003739 0.0323764070 -0.0309451080 0.0855956674 0.0146265274 0.0040997353 0.0049220176 0.0505973658 0.0214662629 -0.0307445214 -0.0121399959 0.0106636718 -0.0642047317 0.0627363058 0.0133770275 -0.0220964243 -0.0683530105 -0.0303138909 -0.0256522702 -0.0104137020 0.0074766296 -0.0019968759 0.0148286209 -0.0065582246 -0.0096608740 0.0430980913 -0.0393377572 0.0315310041 -0.0365827416 -0.0031107903 0.0844103923 0.0590539974 -0.0366689690 0.0183984934 0.0224905351 0.0539906940 -0.0189298849 -0.0146415743 0.0083135479 0.0191928591 -0.0456703056 0.0621719245 0.1350683057 0.0625359887 0.0201990752 -0.1291826410 0.0039324970 0.0028417057 -0.0015801267 0.0089065195 0.0089979850 0.0224460327 -0.0088587845 -0.0057144995 -0.0035368618 -0.0049902494 -0.0074479605 -0.0007582147 -0.0031648917 -0.0040004645 -0.0028802784 0.0029576993 0.0055849569 0.0055183016 -0.0257501713 -0.0059049203 0.0106827642 0.0076021301 0.0050616662 0.0009193744 -0.0138707490 -0.0052607947 -0.0089041075 -0.0090578573 0.0052025393 -0.0442669377 0.0008597615 0.0015852457 0.0103611336 0.0125581269 -0.0085479309 -0.0113546819 0.0042624842 0.0035185818 0.0037855121 0.0004216045 0.0035995874 -0.0003466534 0.0075320497 0.0054444393 0.0106922778 0.0020962962 -0.0003750613 0.0129715205 -0.0008213603 0.0103248236 -0.0113233142 0.0565168068 -0.0019995730 -0.0340345701 -0.0142594258 -0.0065267037 0.0000237131 -0.0097257164 0.0062763364 0.0001519920 0.0034496806 0.0010369666 -0.0008776380 0.0008635819 -0.0015661521 -0.0002227727 0.0008731095 0.0005345086 0.0004424138 0.0013675687 -0.0059623603 0.0035110593 -0.0184007859 0.0154393120 -0.0105481643 0.0032609282 -0.0026666952 0.0017831197 0.0009532609 -0.0008612177 0.0003034187 -0.0025095628 0.0017052980 -0.0009221829 -0.0011514153 0.0019402056 -0.0007892096 -0.0000171858 -0.0001970606 0.0003039213 0.0003587238 0.0000782983 0.0000800664 0.0124537696 -0.0114190553 0.0079891632 0.0093582231 -0.0066954806 0.0052014159 0.0018979193 -0.0027084771 0.0012146993 -0.0007509631 0.0002543350 -0.0009893908 0.0004729166 -0.0002437856 0.0010628765 -0.0018463565 0.0052004293 -0.0017930935 -0.0005180060 0.0012937369 0.0006298148 0.0000506063 0.0022965952 0.0070280925 -0.0043901484 -0.0059240183 -0.0020367807 0.0052880932 0.0016873152 -0.0041477704 -0.0005988335 -0.0007410197 -0.0005944260 -0.0003320263 0.0013792782 -0.0011756901 -0.0125595651 0.0047850635 -0.0048980490 0.0021565897 0.0112202001 -0.0030908837 0.0003686258 0.0007916900 -0.0046513835 0.0051073979 -0.0068593395 0.0006674897 0.0008022114 0.0002630929 0.0078543846 -0.0004264068 -0.0000934147 -0.0005589287 0.0031539237 -0.0023097405 0.0005156230 -0.0217365476 -0.0101947643 0.0069617551 0.0000925266 0.0003519950 0.0004480836 0.0000942276 -0.0002145023 -0.0004009521 -0.0001662285 -0.0004885341 -0.0001822009 0.0000705501 0.0003190163 0.0000805889 -0.0000560880 -0.0000832722 -0.0000764270 -0.0005434550 -0.0006550199 -0.0000944782 0.0000006348 -0.0000723952 -0.0000550664 -0.0000335195 0.0004614452 0.0005016421 0.0005157733 -0.0001266853 -0.0004120231 0.0003104298 -0.0005327290 0.0004556318 0.0000265264 -0.0001302653 0.0005484236 -0.0002929111 0.0010988326 -0.0002070082 0.0017327711 0.0018468979 0.0003471586 0.0019437023 0.0015418275 0.0006885308 -0.0017710257 0.0002306247 -0.0003717423 0.0003793735 -0.0001257894 -0.0002064657 0.0000252159 0.0000076051 -0.0000899091 0.0001570115 0.0000662042 0.0000166527 -0.0004737117 -0.0002922907 0.0002091930 -0.0007197365 -0.0000556633 0.0003224059 0.0007845176 -0.0005279036 -0.0013168975 0.0045250791 -0.0196792185 0.0122324080 -0.0049172347 0.0170146894 0.0055749573 0.0089508996 -0.0228169685 -0.0005745677 -0.0073027653 0.0225912531 -0.0148742014 0.0360498386 -0.0716098465 0.0498971503 -0.0396733322 0.0697370971 -0.0510822703 0.0517033077 -0.0384898823 0.0478551663 -0.0291074034 0.1122642937 -0.0913133625 0.0032633018 -0.0148929281 0.0038540094 -0.1452732022 0.4517983043 -0.2189294630 0.2081649314 -0.4218414514 0.2194431579 0.0179998816 0.0237302664 -0.0056842104 -0.0153751861 -0.0364671057 -0.0027181502 0.0088260399 0.0215983478 -0.0110698117 -0.0339626023 -0.0475020900 0.0430499404 0.0395845779 0.0438920306 -0.0302721746 -0.1016589164 -0.1063347267 0.0660137457 0.1080444724 0.1419175839 -0.0988958231 -0.0052208198 -0.0131751133 0.0044074535 0.2014248138 0.3231290313 -0.1245491082 -0.1939909888 -0.2625673387 0.1369330249 -0.0026518412 0.0026976918 0.0032940182 0.0005156648 0.0033050687 -0.0010596086 0.0021901701 0.0027333385 0.0033146639 0.0009337181 0.0020437495 -0.0032090319 -0.0014368241 0.0005861429 -0.0038918396 0.0131012793 -0.0122682926 -0.0085567179 0.0049359462 0.0134541802 0.0061724564 0.0014365368 -0.0006019164 -0.0057435176 -0.0183679718 0.0188597307 -0.0245813271 0.0176291040 0.0021401469 0.0152934661 0.0010379208 0.0017199992 0.0057170603 -0.0157805523 -0.0055294652 0.0043013679 -0.0229188711 0.0050418023 -0.0221182195 -0.0028979885 -0.0053866265 0.0287384215 0.0120302674 0.0053534053 0.0019981819 0.0071522747 -0.0037874468 -0.0029721262 -0.0064457580 0.0063884096 0.0100743591 -0.0047956233 0.0059607108 -0.0086705894 0.0411331915 0.0009902021 -0.0605627986 -0.0221509097 0.0086251313 0.0194065312 -0.0104705923 -0.0078100850 0.0160351737 0.0038672329 -0.0045266193 -0.0162874934 0.0477603587 -0.0133184781 -0.0882440370 -0.0487050424 -0.0021219786 0.0778806634 0.0002859675 -0.0012428542 -0.0003898861 -0.0019794915 0.0015038195 -0.0009924596 0.0005302034 0.0028966405 0.0036527434 -0.0028656149 -0.0010045508 -0.0049839224 -0.0005233830 0.0005977939 0.0009715288 0.0006246712 -0.0014150647 -0.0010707687 0.0054029269 0.0007303384 -0.0024416988 -0.0043178797 -0.0026753826 -0.0000422617 -0.0363235975 -0.0394125129 0.0219144997 0.1462013364 -0.0311407760 0.0111338414 0.0071904932 0.0017807793 -0.0180043408 0.0432267712 -0.0398398494 -0.0501823752 0.0077865915 -0.0061275622 0.0049602796 0.0070959413 0.0021525696 -0.0052852882 0.0533380075 0.0240066687 0.0500427950 0.0067880739 -0.0034216031 0.0183868449 -0.0221525444 0.0476036066 -0.0187406208 0.1482538355 -0.0134813491 -0.0132144473 -0.0644322166 -0.0243849096 -0.0042280580 -0.0540977363 0.0431875891 0.0027428718 0.0148251730 -0.0002639605 0.0018729599 0.0058820356 -0.0085027369 -0.0038013890 0.0054809847 0.0059148033 0.0025848631 0.0054290355 -0.0220684025 0.0171163584 0.0086190209 -0.0054557467 0.0040987780 -0.0010309764 0.0014469022 -0.0005928038 0.0001278414 -0.0005469101 -0.0005157913 0.0000394799 -0.0003976765 0.0012556687 0.0016678028 -0.0008800115 0.0004096483 -0.0011430667 0.0011805752 -0.0004019622 0.0002121527 -0.0000576782 -0.0002527812 -0.0030900806 0.0039959237 -0.0000639684 -0.0061142057 0.0056557533 -0.0059964499 0.0050316184 -0.0005500856 0.0036306374 -0.0013894956 0.0015235725 -0.0017562266 -0.0002394278 -0.0022421095 0.0005699873 -0.0080629134 0.0219352788 -0.0203676581 -0.0012539381 0.0004847205 0.0017420976 -0.0010387819 0.0051501004 0.0116623943 -0.0147685449 -0.0097414078 -0.0045296286 0.0141841403 0.0073281425 -0.0085265945 -0.0046240697 -0.0044425002 -0.0001757846 0.0073647456 0.0012051313 -0.0020728184 -0.0129049053 -0.0193854340 0.0065259667 0.0221949549 0.0177019413 0.0040572181 -0.0113728718 0.0006682439 0.0070088615 0.0012238325 0.0209371987 0.0033325656 0.0067500492 -0.0090998391 0.0153906213 -0.0014957997 -0.0008007611 -0.0020103857 0.0161448924 -0.0107819604 0.0012842956 -0.0511362096 0.0038457247 0.0033314535 -0.0013820927 0.0002761942 0.0033703844 -0.0018899568 -0.0024667783 -0.0022274120 -0.0019749681 -0.0055887704 -0.0022018050 0.0007061373 0.0027086099 0.0000469443 -0.0002963016 -0.0009965007 -0.0002573579 -0.0013531575 -0.0011084755 0.0003255206 -0.0000381148 -0.0006443802 0.0002569930 0.0002888025 0.0040651388 0.0045818446 0.0043538030 -0.0007853544 -0.0038310670 0.0009450971 0.0004171763 0.0004793996 0.0002047442 -0.0012509364 0.0058615088 -0.0005517447 0.0030386407 -0.0016216670 0.0003888397 0.0013257036 -0.0009482419 0.0069762718 0.0018525344 0.0013638182 -0.0056214740 0.0008695917 -0.0022355134 0.0024948876 -0.0005041774 -0.0026134318 0.0007092972 0.0007085843 -0.0013535275 -0.0007859357 0.0014159917 0.0012907766 -0.0034464809 -0.0023261274 -0.0006015949 -0.0040751485 -0.0020146027 0.0009529401 0.0074004789 -0.0049822632 -0.0119172791 -0.0524627265 0.0088953170 -0.0026077052 0.0060168855 -0.0096522996 -0.0064929766 0.0250074982 0.0454949764 0.0389361920 -0.0026136574 -0.0196551523 0.0128783937 -0.0130472472 0.0435185217 -0.0896835698 0.0384506276 -0.0599131856 0.0475903538 -0.0334018977 0.0184349936 -0.0294590500 0.0451442465 -0.0249223405 0.0907739574 0.0008526347 0.0121631817 -0.0039235321 0.1402788586 -0.4050214370 0.1364101232 -0.1864610148 0.3741240781 -0.1894281622 0.0188769623 0.0211199741 -0.0036175214 0.0004269090 -0.0563767616 -0.0306902681 0.0025560462 0.0227426171 -0.0107166833 -0.0162631608 -0.0385472206 0.0731967248 0.0397338866 0.0393438398 -0.0322436201 -0.0952471768 -0.0972603444 0.0621302070 0.1095839639 0.0958114528 -0.1136274575 -0.0022614479 -0.0129625083 0.0044279085 0.1989143172 0.3082442399 -0.0787196998 -0.1880470885 -0.2505493141 0.1243316292 0.0002954180 -0.0030567758 -0.0080877123 0.0006557634 -0.0013559363 0.0069579445 0.0013469834 0.0037085596 0.0068961101 0.0007274252 0.0006840083 -0.0071335485 0.0205779532 0.0063542567 -0.0025852388 0.0530530992 -0.0506329492 -0.0274783231 -0.0032750857 0.0550208071 -0.0162849994 0.0079133905 0.0089960049 0.0160263707 0.0502739328 0.0480369905 0.1079526337 -0.0389169668 0.0365432513 -0.0871699085 -0.0167480860 -0.0098756800 -0.0061835171 -0.0499807846 -0.0221278897 0.0322649482 0.0161404656 -0.0175889185 0.0749455081 -0.0683697331 -0.0146478970 0.0129458629 0.0669798153 0.0307200607 0.0262961084 0.0177158823 -0.0117420847 0.0009030602 -0.0144063394 0.0141107345 0.0107980521 -0.0408162724 0.0380583918 -0.0312949291 0.0407435001 0.0103670193 -0.0932640376 -0.0600459686 0.0377335665 -0.0108659881 -0.0241135356 -0.0519404872 0.0222369364 0.0083484767 -0.0115433779 -0.0242369162 0.0553229006 -0.0614705798 -0.1476579260 -0.0732852157 -0.0219050401 0.1301959156 -0.0016545094 -0.0033527780 0.0001919040 -0.0075828943 -0.0027430284 -0.0133616285 0.0049262258 0.0065564249 0.0067050759 -0.0017764203 0.0020867459 -0.0068630683 0.0009761609 0.0034893266 0.0030919897 -0.0003827008 -0.0058858073 -0.0057346385 0.0241482607 0.0042272213 -0.0101935896 -0.0114290943 -0.0074300297 -0.0002490451 0.0000235960 0.0000107816 0.0000858823 -0.0000812200 0.0000712337 -0.0001348732 0.0000270415 0.0000381877 0.0000036131 0.0000655345 0.0002726483 0.0002207457 0.0002009459 -0.0002022719 -0.0002122969 -0.0014805802 -0.0005873678 0.0018004110 -0.0003774530 -0.0001616359 -0.0009465967 0.0022162521 -0.0000740624 0.0044670894 0.0019708497 0.0008663252 -0.0051555769 0.0112260274 0.0001797389 -0.0170068298 0.0014893892 0.0007234501 -0.0009936571 -0.0001580533 0.0001536016 -0.0001262585 0.0000167614 -0.0005366726 0.0002998260 -0.0009286439 0.0006638507 0.0005282746 -0.0000704980 -0.0001318301 -0.0001824299 0.0000077967 0.0000304550 -0.0000298474 -0.0017470448 0.0012754381 -0.0008898151 0.0002598672 -0.0002423794 0.0001501686 -0.0000031169 -0.0000101347 -0.0000234196 -0.0001254829 0.0001323575 -0.0001465414 -0.0002141238 0.0001973016 -0.0000891147 0.0001087369 -0.0000847941 0.0000283182 -0.0000371354 0.0000239151 0.0000387424 0.0009433341 -0.0008318663 0.0004751739 0.0012022031 -0.0009834763 0.0008548295 -0.0007518152 0.0005412020 -0.0004580053 0.0000999963 -0.0000428744 -0.0000731235 -0.0000271674 -0.0000671689 -0.0000165791 0.0000421801 -0.0000819693 -0.0002345215 -0.0000836596 0.0002134331 0.0002463947 -0.0007955501 0.0017151077 0.0011527924 -0.0028593743 -0.0001632844 -0.0008534059 0.0028032131 -0.0004183933 -0.0007710073 -0.0013540070 0.0001970046 -0.0003033153 0.0023064122 -0.0016401699 0.0001425155 0.0025223100 -0.0085619024 0.0026740850 -0.0024977315 0.0096777448 -0.0010803713 0.0015410371 -0.0050186154 0.0026331551 -0.0066556318 0.0128624537 -0.0014815568 0.0052837933 -0.0068725892 0.0032189698 0.0000076961 -0.0000447249 0.0000954630 -0.0002758480 0.0010999200 -0.0002577855 -0.0061031379 -0.0073802514 0.0065553437 0.0000742114 0.0000053743 -0.0001847334 0.0003936285 0.0005953077 0.0004950868 0.0003202601 0.0004317059 0.0000965704 -0.0004534584 0.0000307179 -0.0003503099 0.0002299996 -0.0000563288 0.0002682327 -0.0003421387 -0.0015831936 0.0000395373 0.0000883725 -0.0000247153 0.0002267871 -0.0001048150 -0.0004877423 -0.0004564482 -0.0004883149 0.0000574447 0.0004068644 -0.0002577158 0.0002224886 -0.0002888313 0.0000590760 -0.0000883813 0.0000589678 0.0003925659 -0.0008280253 0.0003386403 0.0064004410 0.0061775702 0.0018273216 0.0029082943 0.0017577341 0.0012587467 -0.0043607482 0.0009790482 -0.0016074701 -0.0001351176 0.0001157701 -0.0003367433 0.0005540772 -0.0004524419 -0.0009390850 -0.0004633849 -0.0000074011 0.0001788672 0.0003311004 0.0002745913 0.0002998201 0.0004040814 0.0002295774 -0.0000983400 -0.0009138419 0.0006093491 0.0014251338 -0.0000882442 0.0000797545 -0.0000387737 0.0000290728 -0.0000968927 -0.0000837441 -0.0000141711 0.0001983319 0.0000749364 0.0000535116 -0.0001423057 0.0000935734 -0.0002015525 0.0004404127 -0.0004254995 0.0002727192 -0.0004230820 0.0003534870 -0.0002944241 0.0001015755 -0.0002808548 0.0001463685 -0.0007038829 0.0007718758 -0.0000364899 0.0001025191 -0.0000017009 0.0008574165 -0.0031519216 0.0013281110 -0.0013811628 0.0028339409 -0.0014318778 0.0673596007 0.0828592919 -0.0336762652 -0.0662647025 -0.0818826481 0.0408951224 0.0008144685 0.0142680714 -0.0067007539 0.0345932471 0.0395427568 -0.0184618083 -0.0355185304 -0.0449903219 0.0153630513 -0.3414673195 -0.4492357950 0.2221131336 0.3310123188 0.4799021708 -0.2526120230 -0.0003129692 -0.0085115653 0.0025321104 -0.1503182162 -0.2366631266 0.1118926660 0.1580570119 0.2361633754 -0.1488808897 0.0000199772 -0.0000105331 -0.0000195327 -0.0000120526 -0.0000362620 -0.0000175304 0.0010629746 0.0022193829 0.0030066630 0.0000204552 0.0009709714 -0.0022734139 -0.0000171862 0.0000528176 -0.0000061696 -0.0002393409 0.0001996726 -0.0000238366 0.0001034448 -0.0002883367 0.0002118847 -0.0001382956 -0.0000198587 -0.0002255567 -0.0008154297 -0.0001162294 -0.0013406757 0.0007817250 -0.0001530217 0.0012980874 0.0000978821 -0.0000382135 0.0001724662 0.0001708927 0.0001224356 -0.0001021288 -0.0006150315 0.0001087588 -0.0005335815 0.0001555985 0.0001593162 -0.0001310612 -0.0000670073 -0.0002480930 -0.0001759964 0.0030378657 -0.0017761656 -0.0001008072 -0.0009507273 0.0032804781 0.0016654353 0.0013369246 -0.0004334808 -0.0005583371 0.0068550753 0.0023563401 -0.0110022708 -0.0027239557 0.0005286098 0.0066320284 -0.0015998937 0.0011724035 0.0026342467 -0.0015136575 -0.0018261073 -0.0034089275 0.0076515089 0.0002479518 -0.0141162329 -0.0088333111 -0.0014341798 0.0096115671 -0.0004377157 0.0010939193 -0.0001712354 0.0019101616 -0.0013828833 0.0013160834 -0.0015482133 -0.0037258570 -0.0044814774 0.0022901040 0.0004008223 0.0043337006 0.0008125523 -0.0012444762 -0.0002550998 -0.0064223713 0.0001446402 0.0024441395 -0.0039950087 0.0015529395 0.0008496141 0.0049444993 0.0038990093 -0.0020465065 0.0003991680 0.0005936834 -0.0006964131 -0.0028224942 0.0005142880 -0.0028950491 -0.0001935311 -0.0001458238 0.0006731544 -0.0004468030 0.0003759398 0.0005026384 0.0000378119 -0.0000885969 -0.0000209801 0.0000237274 0.0000654183 0.0001223242 -0.0006047102 -0.0003592258 -0.0005299763 -0.0000860454 -0.0000004236 -0.0000502005 0.0002330724 -0.0004190611 0.0000714133 -0.0010489813 0.0001018418 -0.0003713283 0.0006078147 0.0002510600 0.0000917272 0.0003743614 -0.0002566915 0.0000196854 0.0000347723 0.0001948634 0.0001819679 0.0000000007 -0.0000425600 -0.0001402331 -0.0002617700 -0.0005813711 -0.0003072010 0.0003479910 0.0055328627 -0.0063141413 -0.4698877015 0.3938464797 -0.2623914968 0.0767973168 -0.0651808702 0.0507774528 -0.0010810117 -0.0004981424 0.0027119943 -0.0476976332 0.0393641362 -0.0296732250 -0.0587909147 0.0548735685 -0.0326699847 0.0326601728 -0.0257639051 0.0120444065 0.0024788012 -0.0024324174 0.0023121714 0.2795654079 -0.2630688076 0.1602712056 0.3544504364 -0.2867399295 0.2131006651 -0.2177296032 0.1324233523 -0.1344810167 0.0003769599 -0.0015003071 0.0009470528 0.0009354701 -0.0015702484 -0.0026530945 -0.0004539045 -0.0032526705 0.0047933738 0.0005888772 -0.0016824502 -0.0031435402 0.0025837942 -0.0065083995 -0.0075632938 0.0114217216 0.0034581945 0.0039683050 -0.0117733190 0.0001345329 0.0048538182 0.0058398469 0.0015594842 0.0019102658 -0.0087336627 0.0035463240 0.0013862770 -0.0031531621 0.0265261935 -0.0059217506 0.0062362892 -0.0346848893 0.0058713643 -0.0006713839 0.0135928686 -0.0056784321 0.0167550480 -0.0378693115 0.0057646011 -0.0170548163 0.0212984984 -0.0143168406 -0.0009504194 0.0027680139 -0.0009386071 -0.0027833246 0.0087531317 -0.0025087142 0.0003343704 -0.0001520325 0.0000238835 0.0007796450 -0.0004643652 -0.0007069909 0.0007973152 0.0011561257 0.0004890587 0.0006903346 0.0016036481 0.0007563963 -0.0003388263 -0.0005979691 -0.0001972327 0.0001253564 0.0001811972 0.0000728860 0.0002261413 0.0000873341 0.0001216910 0.0001537091 0.0000830578 0.0000601268 -0.0000854625 -0.0013596191 -0.0014746282 -0.0014803911 0.0002888938 0.0012711619 -0.0002260875 -0.0003430492 -0.0000810861 -0.0002792099 0.0002249619 -0.0008825081 0.0000282053 -0.0005425075 0.0006106030 -0.0000136584 -0.0001000705 -0.0001914595 0.0009572460 -0.0002847599 0.0000268111 -0.0006309388 0.0003333824 0.0004399372 -0.0007229970 0.0002040263 0.0003399745 0.0002688595 -0.0003400257 -0.0002952424 -0.0003028627 -0.0001530376 -0.0000759867 0.0008691515 0.0007472630 0.0002185131 0.0012365677 0.0007104644 -0.0002198965 -0.0024900564 0.0016430900 0.0039327674 0.0007150355 -0.0004318011 0.0006734098 -0.0044395435 0.0094442461 -0.0061300265 0.0049346725 -0.0083199013 0.0076515832 0.0017046468 0.0014896504 -0.0014852154 -0.0027588970 0.0038957901 -0.0058962024 0.0028376188 -0.0057899057 0.0041698337 0.0234650878 -0.0562251132 0.0265552353 -0.0355153168 0.0591102395 -0.0181963610 0.0002999838 -0.0006719783 -0.0006041621 0.0056101146 -0.0352359341 0.0115341388 -0.0195207860 0.0336349568 -0.0154628096 -0.0000981602 -0.0000805643 0.0000105834 -0.0001001153 0.0003334339 0.0002790881 0.0000737520 -0.0000311689 0.0000002335 -0.0002639029 -0.0001943553 -0.0003065610 0.0000744145 0.0001532999 0.0000005894 0.0003774862 0.0004435409 -0.0002532180 -0.0003725186 -0.0000202276 0.0004831390 -0.0000429376 0.0000150311 0.0000004660 0.0004311656 0.0005984901 -0.0007947423 -0.0004531939 -0.0006707172 0.0004826342 -0.0006701905 -0.0001904144 -0.0008492007 0.0001627932 0.0002331240 0.0017832423 0.0000102241 -0.0000170081 -0.0000641600 0.0000036471 0.0000143218 0.0000618993 -0.0006136215 -0.0001538092 -0.0000104777 -0.0006357260 0.0005546367 0.0002764713 0.0002599847 -0.0005236387 0.0005182425 -0.0000157254 -0.0003607024 -0.0005001287 -0.0015625322 -0.0002207592 -0.0029511706 0.0011384801 -0.0008711686 0.0018554981 0.0004254883 0.0004250610 0.0002945785 0.0003679590 0.0002530565 -0.0004694268 -0.0009344716 0.0006760065 -0.0022896381 0.0012288159 0.0000891013 0.0008233110 -0.0007577035 -0.0003771862 -0.0003449890 -0.0001332883 0.0000824609 -0.0000770993 0.0000749475 -0.0000117812 0.0000311970 0.0005127890 -0.0004645744 0.0002993230 0.0001977233 -0.0000610578 0.0001289835 0.0004048475 -0.0005169112 0.0004826519 0.0001639887 0.0006773855 -0.0000073228 -0.0000473234 0.0000629622 0.0000351707 0.0001815600 0.0007080056 0.0004468257 0.0001569164 0.0001836165 -0.0003739695 0.0002593828 0.0013331690 -0.0002907825 0.0022494258 0.0008496023 0.0041573694 -0.0030637206 -0.0030275433 -0.0028912257 0.0012449529 -0.0000139263 0.0020919406 -0.0005739440 -0.0005224982 -0.0007212037 -0.0003599135 0.0004965251 0.0002872436 -0.0054709642 -0.0015837434 0.0026475550 0.0022921178 0.0015596989 0.0007909800 0.0028401993 0.0026748622 -0.0011557445 -0.0095827166 0.0020441588 0.0006884748 -0.0005916922 -0.0000332164 0.0008644448 -0.0025423133 0.0044128307 0.0044482065 0.0005346377 0.0002107500 -0.0015203050 -0.0007960330 0.0005673956 0.0002656523 -0.0063119106 -0.0015893475 -0.0046146795 -0.0008307475 0.0004022717 -0.0010218700 0.0028616311 -0.0055043487 0.0015408862 -0.0139807988 0.0016250263 -0.0027056439 0.0064841649 0.0020181784 0.0005486785 0.0044003737 -0.0040277821 0.0010076508 -0.0009279538 -0.0006805317 -0.0022671314 -0.0018462029 0.0028322332 0.0033797289 0.0001336768 -0.0005917009 0.0015141581 -0.0071666565 0.0336830918 -0.0191553895 -0.0493477047 0.0413330045 -0.0279735741 0.0079767630 -0.0070814692 0.0049638001 -0.0005722961 -0.0004125103 -0.0016420790 -0.0059269365 0.0040129627 -0.0016628584 -0.0056100898 0.0072137532 -0.0035321143 0.0036482800 -0.0034898587 0.0022684695 -0.0000760478 -0.0007823807 0.0002397163 0.0286258069 -0.0265485437 0.0188806289 0.0406158415 -0.0309209118 0.0232634825 -0.0283214663 0.0191477198 -0.0159128419 0.0020272996 -0.0034515104 -0.0006190246 -0.0000362405 -0.0029055082 -0.0029556082 -0.0035654242 0.0268268990 -0.0464816031 -0.0070893283 0.0111221015 0.0078216524 -0.0388859541 0.0823826504 0.0681182840 -0.1303274431 -0.0236147609 -0.0420430627 0.1348244945 -0.0123439674 -0.0448310342 -0.0478271431 -0.0003386149 -0.0110214029 0.0928262411 -0.0655436104 0.0068937782 0.0697658792 -0.3419366330 0.0952676916 -0.1112457943 0.4494056583 -0.0654663001 0.0258188472 -0.1428939165 0.0889535501 -0.2696576201 0.5185003034 -0.0582954374 0.2393180496 -0.3151510485 0.1649685698 0.0007029315 0.0003255727 0.0003468876 -0.0149136878 0.0124166670 -0.0005066015 0.0051116822 -0.0017196520 0.0002501725 -0.0044447374 -0.0009811239 0.0021147812 -0.0027360228 -0.0039928985 -0.0027509918 -0.0031036590 -0.0067713590 -0.0031052879 0.0020660618 0.0018556209 0.0007706197 -0.0007781604 -0.0003606005 0.0000735430 -0.0018327014 0.0002372273 -0.0006446433 -0.0010448712 0.0000058154 -0.0001915000 0.0009226311 0.0043726793 0.0049017484 0.0045030109 -0.0007690296 -0.0033271702 0.0010239264 0.0003906390 0.0016807777 0.0022518705 -0.0004660282 0.0003782833 0.0004148779 0.0014197632 -0.0031494772 -0.0014574434 -0.0003913218 0.0024138440 -0.0107985530 0.0010458717 -0.0006301403 0.0149355539 -0.0049443646 -0.0038929096 0.0024781464 -0.0006403515 -0.0005512998 -0.0018103628 0.0017175479 0.0019369340 0.0016677261 0.0004703838 0.0001659612 -0.0031689839 -0.0022080083 0.0003093636 -0.0045306234 -0.0035352643 0.0010208335 0.0082228907 -0.0057687897 -0.0141930399 0.0026476247 -0.0003680512 0.0002563522 -0.0000856865 -0.0000242499 -0.0020476214 -0.0011668499 -0.0017397207 -0.0009628436 -0.0000680412 -0.0000630318 0.0002689769 -0.0009847684 0.0010732236 0.0014614586 -0.0003871338 0.0016342259 0.0006557759 0.0012174202 -0.0055222806 -0.0000066709 -0.0048594259 0.0006968421 -0.0001816438 -0.0007347773 0.0008086189 0.0011188196 -0.0024878651 -0.0024443070 0.0021034058 0.0017373722 -0.0034560891 0.0040664961 -0.0029311224 -0.0031916853 0.0000128846 0.0002605967 0.0068617089 0.0033838282 0.0007563852 -0.0014230840 0.0005772366 -0.0025196861 -0.0010425120 -0.0058116058 -0.0002397566 0.0010542623 0.0015659751 0.0131675186 0.0148659961 -0.0095133839 -0.0128586254 -0.0133911673 0.0151398751 -0.0002027742 0.0005698864 -0.0002298824 -0.0013017691 -0.0031832562 -0.0065898413 0.0011428942 -0.0004002712 0.0034014906 0.0005296554 0.0003582629 0.0011721311 -0.0004332009 -0.0010195834 -0.0020397306 -0.0000123025 -0.0002311731 -0.0005183688 -0.0000324091 0.0001083837 0.0005403520 -0.0011763411 -0.0004020745 0.0003621141 -0.0042953978 0.0045680763 0.0020901316 -0.0000542871 -0.0051432746 0.0008712933 -0.0008556049 -0.0000132868 -0.0009045291 -0.0023735933 -0.0050162953 -0.0070891331 0.0031851298 -0.0011978100 0.0062352058 0.0006571786 -0.0002303061 0.0001915637 0.0044011340 0.0018113504 -0.0021184196 0.0005363265 -0.0000574303 -0.0030473880 0.0035223966 0.0022547031 -0.0039449295 -0.0071767100 -0.0031696569 -0.0036086840 -0.0018319084 0.0012044620 -0.0006718275 0.0007875587 -0.0017703260 0.0002314025 0.0046870351 -0.0043148396 0.0028578371 0.0011365337 -0.0022066671 0.0026976580 0.0045497019 -0.0041621905 0.0042243932 0.0015449766 0.0054114688 -0.0005638845 0.0001803978 0.0014563801 0.0010021645 -0.0008579304 0.0059298077 0.0056599976 0.0024174369 0.0041175436 -0.0048354847 -0.0063027557 0.0016144807 0.0045406843 -0.0037057519 -0.0181442572 -0.0255555839 0.0096782418 -0.0046415685 -0.0100268905 0.0198634550 0.0157748429 0.0221862129 0.0082657992 -0.0036452974 0.0020951590 -0.0179308112 0.0054796461 0.0160245577 0.0016088706 0.0187389992 -0.0077053357 0.0175287217 0.0164119174 -0.0165070999 0.0021003334 -0.0010350446 0.0052203214 0.0092558679 -0.0024602653 0.0207939498 0.0024781416 -0.0005860496 -0.0050052421 -0.0030467998 -0.0030379522 -0.0004830607 -0.0035177429 -0.0015211624 0.0000704191 0.0023275344 -0.0009305642 0.0011339948 0.0065056383 -0.0006615084 0.0024190470 0.0006463211 -0.0005318717 0.0003057020 -0.0030394771 0.0053881941 -0.0012952067 0.0116772240 -0.0017667288 0.0052352960 -0.0065289536 -0.0022040319 -0.0012304179 0.0011863279 -0.0002693252 -0.0005293561 0.0015807859 0.0008612820 0.0001527653 -0.0001007122 0.0002134491 -0.0000209451 -0.0010557298 -0.0006931574 -0.0014625174 -0.0008660632 0.0052620686 -0.0021897590 -0.0376724452 0.0352222632 -0.0227115030 0.0058556591 -0.0048247441 0.0047475610 -0.0031674378 0.0016865459 -0.0010867700 -0.0023277416 0.0032590364 -0.0024592373 -0.0089670869 0.0051943229 -0.0047770040 0.0078264500 -0.0040267086 0.0013338680 -0.0006170756 -0.0007405797 -0.0000616585 0.0209465051 -0.0177091018 0.0112005382 0.0465291690 -0.0409507093 0.0296003078 -0.0578544506 0.0507975972 -0.0340829551 -0.0002157293 -0.0006202254 0.0022591270 0.0014039396 -0.0011332251 -0.0013604982 -0.0023932214 0.0100179465 -0.0094153555 -0.0006186736 -0.0000519593 -0.0024456433 -0.0013441845 0.0002832796 -0.0046999958 0.0044361128 0.0046282313 0.0013575467 -0.0034835877 -0.0038787789 0.0034501973 0.0027459232 0.0027311866 0.0007242955 -0.0016063592 -0.0034428133 0.0023049455 0.0096887644 -0.0001507257 -0.0003792501 -0.0131772623 0.0055395895 -0.0019294591 0.0058521166 0.0007737975 -0.0027666361 -0.0118028814 0.0069042860 -0.0034401005 0.0050867528 -0.0102446892 -0.0021759720 -0.0005154023 0.0002284094 -0.0000600575 0.0079053831 -0.0047474030 -0.0006652032 -0.0050141844 0.0027324354 -0.0008380782 -0.0006763237 0.0005539308 0.0012140029 -0.0006837622 -0.0012099886 -0.0007759229 -0.0006363924 -0.0014021605 -0.0004532908 0.0003921393 0.0008136625 0.0001669332 -0.0001889490 -0.0003229404 -0.0001003163 -0.0001740655 -0.0003141690 -0.0000311897 -0.0001927822 -0.0002495625 -0.0000515385 -0.0001590059 0.0015558980 0.0017800035 0.0017505885 -0.0003238717 -0.0016499316 0.0003234539 0.0004491277 0.0001270112 0.0002305803 -0.0004140145 0.0019260031 -0.0000027828 0.0010284986 -0.0011504382 0.0000233593 0.0002711303 -0.0003161630 0.0002141265 0.0006296324 0.0002411889 -0.0014012164 0.0001016299 -0.0004797008 0.0012406182 -0.0003794220 -0.0008210085 -0.0003334246 0.0006705204 0.0003649799 0.0001587617 0.0004653536 0.0003461730 -0.0010400698 -0.0008579763 -0.0003219954 -0.0013935975 -0.0007433087 0.0001570194 0.0028572301 -0.0018338111 -0.0043205787 -0.0025383838 0.0110456714 -0.0064386500 0.0455592370 -0.0884946779 0.0410937746 -0.0469604988 0.0991821252 -0.0520822642 -0.0015408718 -0.0215926552 0.0152815422 0.0111589445 -0.0203629604 0.0099649021 -0.0123445925 0.0259881392 -0.0097918887 -0.2193220408 0.4868984013 -0.2547781565 0.2485980620 -0.6178933374 0.3424004073 0.0023021017 0.0141508273 -0.0043260912 -0.0294100832 0.1034955175 -0.0522114316 0.0497775237 -0.1237284051 0.0847763361 0.0008712511 0.0009318487 0.0032466263 0.0023140206 -0.0050493620 -0.0069343096 -0.0013959328 0.0007988706 -0.0002431453 0.0029542522 0.0019320033 0.0079876307 0.0005395509 -0.0018878236 -0.0032178195 -0.0028980854 0.0045789884 0.0045636246 -0.0030787088 -0.0046778218 -0.0108788739 0.0005543233 -0.0002525295 0.0001003158 -0.0020253529 0.0066408678 0.0106037246 -0.0042189370 -0.0009530151 -0.0063968309 0.0010215093 -0.0033670476 -0.0059169921 -0.0016283014 -0.0025818174 0.0039386701 -0.0000529581 0.0002464739 0.0009370904 0.0000455857 -0.0002929135 -0.0009412720 0.0035191955 0.0010318574 -0.0001515468 -0.0001547210 -0.0004697570 0.0007490633 -0.0014531228 0.0004596044 -0.0017701459 -0.0009142534 0.0010623379 0.0025954542 0.0029367036 -0.0000886336 0.0114349012 -0.0076396078 0.0003618243 -0.0059485032 -0.0010328168 -0.0015241661 -0.0010108397 0.0010273764 0.0002203539 -0.0002837200 0.0026125905 -0.0020598701 0.0062975524 0.0003432479 -0.0006409366 -0.0019977868 0.0062755607 0.0023429666 0.0040541049 0.0017728441 -0.0011047110 0.0009832744 -0.0003769958 0.0026264585 -0.0006431276 -0.0038806863 0.0040599046 -0.0029260713 -0.0025618590 0.0033101100 -0.0006073507 -0.0053599385 0.0043426400 -0.0013289915 -0.0004346483 -0.0042200138 -0.0005394528 -0.0013957491 -0.0020420339 0.0001700401 -0.0011863312 -0.0044575798 0.0025015161 0.0019278829 -0.0065697530 -0.0025791306 0.0010971956 -0.0038654865 0.0004477766 -0.0072421818 0.0035881977 -0.0070820503 0.0048013604 0.0117832858 0.0142806383 -0.0069878609 -0.0008039826 -0.0143551018 -0.0007990043 0.0024120968 0.0010186050 0.0089136214 -0.0012894211 -0.0046474130 0.0100611684 -0.0012252430 -0.0029211412 -0.0097689851 -0.0073494682 0.0021132680 0.0007218544 0.0005385199 0.0004670879 -0.0020126622 0.0010106578 0.0026512819 -0.0002626873 0.0006165414 -0.0000633552 -0.0005535074 0.0022615950 0.0021018680 0.0011599858 -0.0012266805 -0.0013882556 -0.0002526359 0.0012692450 0.0004298954 -0.0035798923 -0.0004344084 -0.0026150084 -0.0008328308 -0.0003820931 -0.0005326632 0.0015125007 -0.0029584093 0.0005105806 -0.0079147647 0.0003320335 -0.0027352050 0.0058580716 0.0018620975 -0.0006612418 0.0023179075 -0.0016455503 0.0011206241 -0.0037410383 -0.0015342331 -0.0000221440 -0.0013933585 0.0026045765 0.0014634744 0.0002210016 -0.0006327479 -0.0006744651 0.0095231649 -0.0390626384 0.0145915168 -0.0043063261 0.0016016592 0.0023305931 -0.0001230813 0.0006534520 0.0025983079 -0.0011753951 -0.0001818376 -0.0012826681 -0.0030964557 0.0002321308 0.0008463173 0.0020068350 0.0029971008 0.0002641113 0.0005502612 -0.0001576794 -0.0018377929 0.0000743606 -0.0030495083 0.0005828310 0.0019825596 -0.0097431931 0.0024919830 0.0043007496 0.0014891252 0.0003851060 -0.0039550098 -0.0038727451 -0.0068080091 0.0035730742 -0.0009551891 -0.0018418466 -0.0030750288 0.0074926548 0.0006800207 0.0326825012 -0.0821708937 0.0535137919 0.0071374120 -0.0017468979 0.0191603532 0.0293426932 -0.0119768908 0.0959849881 -0.0687268588 -0.0900580189 -0.0249899754 0.0647238630 0.0637041369 -0.0648522589 -0.0285404759 -0.0182588213 -0.0072237493 -0.0044752906 0.0562005945 -0.0252985917 -0.1979714466 0.0602099068 -0.0375212135 0.1991413741 -0.0678534819 0.0049689901 -0.0271803690 -0.0419381099 0.0406161962 0.2052454092 -0.1976644164 0.0710181098 -0.1281281554 0.2339365613 0.0398924217 0.0018371534 0.0008265065 0.0000053860 -0.0317502937 0.0176799281 0.0021055810 0.0029321442 -0.0017134183 0.0004616580 -0.0014430643 -0.0125756684 -0.0073828032 0.0068811033 0.0060422573 -0.0029112572 -0.0011462708 -0.0035193257 -0.0047706722 -0.0005402612 -0.0014761529 -0.0011980492 0.0001426238 0.0009350701 0.0010100358 0.0002478453 0.0016086407 0.0005935146 0.0005966247 0.0016702969 0.0006638509 0.0023079703 -0.0098649040 -0.0090122542 -0.0105857373 0.0035978579 0.0119063067 -0.0000119223 -0.0032431273 0.0025555165 0.0022143342 0.0011975959 -0.0093441192 0.0000770230 -0.0035435681 0.0035785304 -0.0016572400 -0.0026164880 0.0016430509 0.0016429106 -0.0045105055 -0.0012773703 0.0037896981 0.0004107493 -0.0000646653 -0.0056550851 0.0023130950 0.0039066964 0.0015218906 -0.0031134876 -0.0016763751 -0.0008334547 -0.0021546012 -0.0015661215 -0.0046357946 0.0047084766 0.0095746416 0.0000118523 0.0019829590 0.0056320882 -0.0128616545 0.0063936396 0.0186714074 0.0002040184 0.0008310096 -0.0004570043 0.0028617197 -0.0062439763 0.0007789995 -0.0029894124 0.0071786786 -0.0022068053 -0.0006453827 -0.0018997486 0.0014624330 0.0000179398 -0.0007238846 -0.0012604040 0.0005489962 0.0014215828 0.0013983899 -0.0161491282 0.0269938698 -0.0179829422 0.0148650298 -0.0409223405 0.0260394848 -0.0001247372 0.0014395173 -0.0006505389 -0.0019248216 -0.0046625433 -0.0007709263 -0.0014781325 0.0009730251 0.0037914148 -0.0009902674 -0.0012341015 -0.0027677663 -0.0010879231 0.0037047180 0.0048011137 0.0010389678 -0.0003274002 0.0000430894 -0.0026352240 -0.0025318664 -0.0050204642 0.0003735335 0.0024979998 0.0024657573 0.0037190205 -0.0025092925 -0.0049224748 0.0029371749 0.0008177993 0.0100970316 -0.0005603461 -0.0000623217 -0.0000919112 0.0075461154 0.0004018577 -0.0111332156 0.0003166215 -0.0041929018 0.0087095531 0.0001844767 -0.0003780084 -0.0005797893 0.0001359317 0.0000703916 0.0004688666 0.0001132979 -0.0001787567 -0.0008347149 -0.0000101287 0.0003837111 0.0008549469 -0.0002142433 0.0002056343 0.0002600162 -0.0018290341 0.0022403257 0.0008967931 -0.0001467627 -0.0028723643 0.0002774840 -0.0005943658 0.0002975201 -0.0004722119 -0.0009236047 -0.0028730754 -0.0029144383 0.0024265001 0.0003042720 0.0036676252 -0.0003668269 -0.0008644464 -0.0003433431 0.0024082047 0.0009740539 -0.0003650673 0.0019109260 -0.0011688982 0.0022723297 -0.0007256644 0.0027423630 -0.0049228224 -0.0044497998 -0.0018799114 -0.0023547152 -0.0012284213 0.0005134885 -0.0006619745 0.0001752818 -0.0010127311 0.0002659903 0.0028724624 -0.0030862835 0.0017764170 0.0011540526 -0.0013946957 -0.0001583588 0.0020924579 -0.0039933602 0.0024623832 0.0006751803 0.0035937383 0.0000620707 0.0006438101 0.0011541401 0.0003109589 0.0000079734 0.0038937677 0.0006400974 0.0003502565 0.0032649977 -0.0005183643 -0.0495426494 0.0829250172 0.0015150214 0.1288005300 -0.1446666484 0.0389716093 -0.0704351837 -0.2621317803 -0.3347565599 0.2097973007 0.0704485213 0.3665380292 0.0482098995 -0.0540832632 -0.0022243039 -0.3228757035 -0.0109184789 0.1167979011 -0.1339917347 0.1153655212 0.0024730242 0.2468611256 0.2037238344 -0.1065162360 0.0039011657 0.0034460137 -0.0007938720 -0.0119677316 0.0029647248 0.0041577347 -0.0008951032 0.0004281407 0.0006205706 -0.0036627419 0.0050675400 0.0052081223 0.0014438226 -0.0015858560 -0.0021261495 0.0010482740 0.0017069923 0.0018068449 -0.0067232121 -0.0030795504 -0.0055139698 -0.0013855074 -0.0004627620 -0.0009801521 0.0027623373 -0.0052185245 0.0009571963 -0.0146102336 0.0008246223 -0.0045457652 0.0092040346 0.0031699003 -0.0011604581 0.0054646146 -0.0041866774 0.0010679208 -0.0025768225 -0.0006157581 0.0010793234 -0.0032913581 0.0066059725 0.0042782834 -0.0031032961 -0.0054885856 -0.0047363466 -0.0133030772 0.0656461057 -0.0342636325 -0.0052349704 0.0047326997 -0.0053810702 0.0008896959 -0.0013483056 -0.0006390439 -0.0009463839 0.0052601464 0.0051354959 0.0052431823 0.0009425658 -0.0047610323 -0.0066023634 -0.0045774178 -0.0017732957 0.0013685240 -0.0024758303 0.0028715675 -0.0008804162 0.0019514314 -0.0002107302 0.0035141979 0.0049873241 -0.0055802367 0.0061266788 -0.0156549897 0.0044853157 -0.0188454357 0.0125102056 -0.0075927947 -0.0000695723 0.0010303373 0.0073897722 -0.0057734577 -0.0101923055 -0.0101480273 -0.0132602013 0.0622388631 -0.1192760150 0.0017196798 -0.0044259214 0.0070412054 0.0272076370 -0.0075924069 0.1089418854 -0.0801785958 -0.1039831541 -0.0300750062 0.0847917302 0.0789805834 -0.0759395957 -0.0209454514 -0.0165429335 -0.0028926794 -0.0077207760 0.0571885748 -0.0188124780 -0.2251481608 0.0633609019 -0.0443809731 0.2454934842 -0.0471447185 0.0266791578 -0.0395092282 -0.0223307384 0.0612363581 0.2111134921 -0.1978374645 0.0890853595 -0.1237824580 0.2265386063 0.0567222565 -0.0004947161 0.0005887311 0.0016364562 0.0255685913 -0.0144696548 -0.0031265807 0.0046902166 -0.0022396708 0.0005870907 0.0006960729 0.0107238139 0.0101294914 -0.0106113378 -0.0048377690 0.0022034177 0.0003140892 -0.0027795515 0.0029227606 0.0002504818 0.0035315782 0.0013170725 0.0002663661 -0.0013551861 -0.0010884577 0.0009731528 -0.0027481490 -0.0011113717 -0.0006447461 -0.0019363582 -0.0005655048 -0.0019581578 0.0127050736 0.0129308942 0.0149967798 -0.0049704915 -0.0150709592 0.0000197273 0.0042387530 -0.0036349966 -0.0029309698 -0.0016228563 0.0118187480 -0.0005266726 0.0037984926 -0.0020474763 0.0072210740 0.0026826618 0.0044735134 -0.0031357942 0.0041417412 0.0011068799 -0.0117928261 0.0013800837 -0.0029315665 0.0073911930 -0.0024859219 -0.0059692394 -0.0012346629 0.0032949370 0.0012160997 0.0008412116 0.0021424428 0.0016345605 0.0019581027 -0.0079765407 -0.0129982439 -0.0026276048 -0.0038530260 -0.0048108408 0.0182510497 -0.0092864377 -0.0295444642 0.0035491124 0.0008128288 -0.0006198987 0.0002542325 -0.0016277732 -0.0010506857 -0.0025110386 -0.0000434311 -0.0017830986 0.0006769924 -0.0006726311 0.0005184146 -0.0019655451 0.0020675178 0.0007764378 0.0010444604 -0.0006105225 0.0016207779 -0.0052237923 0.0018859718 -0.0048125644 -0.0017685288 -0.0106653503 0.0070695522 -0.0005122623 0.0008077676 -0.0002988346 -0.0003512791 -0.0135217674 0.0071731757 -0.0056892896 0.0093959156 -0.0020383555 -0.0000727709 0.0000897616 -0.0021284637 -0.0027620673 0.0033013458 0.0054534378 0.0013568006 -0.0008460267 0.0002754306 -0.0017935674 -0.0004544028 -0.0063573894 -0.0010784978 0.0005424497 0.0024957563 -0.0012734147 -0.0054242058 -0.0007499960 0.0028766551 0.0091870681 0.0036354523 -0.0002805060 0.0003750550 -0.0000693965 -0.0033158770 -0.0086115683 -0.0049961942 0.0049583637 0.0049291325 0.0013351134 0.0001557354 -0.0001416963 -0.0001269552 0.0000398380 -0.0000098659 0.0001522792 -0.0000383666 -0.0001093238 -0.0002422212 -0.0000548379 -0.0000177817 0.0002984397 -0.0016810674 -0.0001320992 0.0008276955 -0.0057368886 0.0060339079 0.0032699291 -0.0002335067 -0.0067724836 0.0009535141 -0.0009258843 -0.0006707204 -0.0015753211 -0.0038941086 -0.0064488354 -0.0077895813 0.0043836749 -0.0030490735 0.0089706946 -0.0000265605 0.0000075710 -0.0009204999 0.0066448851 0.0027681485 -0.0016412770 0.0053045416 -0.0005962293 0.0034617474 0.0003451596 0.0056336469 -0.0116500216 -0.0088073489 -0.0043143224 -0.0044111417 -0.0021258787 0.0007959121 -0.0010709557 0.0001818180 -0.0006761661 0.0007551667 0.0061149103 -0.0059273376 0.0028249448 0.0039256479 -0.0016239360 -0.0021307581 0.0016572882 -0.0076879145 0.0085233935 0.0018300954 0.0077737185 -0.0003317953 0.0001950627 0.0015279080 0.0010963096 -0.0003511982 0.0083918932 0.0051044098 0.0031184529 0.0036579401 -0.0052360459 0.0460164557 -0.0783402398 -0.0018193993 -0.1217601020 0.1341156519 -0.0392333392 0.0643189738 0.2437529333 0.3126776993 -0.1975394493 -0.0671877448 -0.3442905858 -0.0443003125 0.0547258738 0.0025487327 0.3162845273 0.0054306204 -0.1201870988 0.1364809814 -0.1064650721 -0.0057885664 -0.2434226381 -0.2008245904 0.1019617679 0.0453372169 0.0400900393 -0.0138026063 -0.1025295598 0.0190829435 0.0602632982 -0.0075634458 -0.0021240844 -0.0012253588 -0.0589403805 -0.0108925384 0.0147975397 -0.0315548302 -0.0065753503 0.0154507635 0.0268894794 -0.0218259326 0.0163866454 0.0448245299 -0.0368627280 0.0059040603 0.0060990011 0.0000489636 0.0013779412 -0.0237181890 0.0430282531 -0.0104770553 0.0940553497 -0.0096610152 0.0480556241 -0.0427204872 -0.0122663956 -0.0156530829 0.0428692855 -0.0307972801 -0.0149250943 -0.0004169016 0.0019617464 -0.0009100832 -0.0021995360 0.0038469518 -0.0027466253 0.0029980826 0.0021848968 -0.0029419364 -0.0004080267 0.0062116912 -0.0064720124 -0.0021350837 0.0009901532 -0.0010378511 0.0003416007 -0.0002914084 -0.0001210815 0.0002436378 0.0000369310 0.0005754298 0.0005729131 -0.0001969782 -0.0005892662 -0.0011388023 0.0005235202 -0.0001228452 0.0010382387 -0.0008371656 0.0006397620 -0.0004036781 0.0004448298 0.0001067925 -0.0003237439 0.0004080962 -0.0012223813 0.0038457261 -0.0037207196 0.0034764706 -0.0032205010 0.0031397687 -0.0013293003 0.0000250272 -0.0011640200 0.0005464812 -0.0005881139 0.0008630164 -0.0010157512 0.0023521116 -0.0056153161 0.0017496295 0.0003569432 0.0000474712 0.0015516999 0.0006436990 0.0017429615 0.0091189662 -0.0075862256 -0.0080066264 -0.0028165020 0.0084233469 0.0041930245 -0.0061207284 -0.0019909322 -0.0015046019 -0.0005531710 0.0010303858 0.0025623855 -0.0013519752 -0.0159435580 0.0010691467 -0.0029446618 0.0095878464 0.0058560025 -0.0043395722 -0.0031015593 -0.0025843409 0.0050353791 0.0086982276 -0.0045091772 0.0039151120 -0.0014926724 0.0057663239 0.0085684197 0.0003248592 -0.0001697322 0.0003595898 -0.0052216866 0.0067497441 -0.0008230372 -0.0504374721 0.0357056548 -0.0133590967 -0.0002065964 -0.0012011960 0.0005700111 -0.0011199380 -0.0006368438 -0.0004457690 -0.0004814817 -0.0014449484 -0.0002984684 0.0011258131 0.0012665560 -0.0003660553 -0.0007498423 -0.0006854050 0.0002814719 -0.0009348413 -0.0010411781 0.0002065768 -0.0005471964 -0.0005575138 0.0002015663 0.0000531938 0.0007460523 0.0010286170 0.0009604758 -0.0001940134 -0.0008393497 0.0003928864 -0.0011560945 0.0017163612 -0.0000365300 -0.0008254099 0.0037643482 0.0008381780 0.0027463235 -0.0046786604 -0.0012991806 -0.0007887591 -0.0004699989 0.0050077463 0.0040364182 0.0018189152 -0.0050987717 0.0003785664 -0.0005982817 0.0015839950 -0.0005755174 -0.0013861973 -0.0008592731 0.0019659532 0.0009973009 -0.0007408315 0.0019298701 0.0015883180 -0.0003923739 -0.0005280266 -0.0007276663 -0.0003673877 -0.0006022678 -0.0001337869 0.0015684531 -0.0009752334 -0.0025331891 0.0602879485 0.0186628800 -0.0162366500 -0.0083187773 0.0333569118 0.0584311652 -0.0438547638 -0.0722357447 -0.0885611371 0.0272706970 0.0050885502 -0.0050866072 -0.0278426706 0.0604393883 0.1014950890 -0.0130778965 -0.0494356132 -0.0505602935 0.0964766769 0.0620335757 0.0925006132 0.0345356766 -0.0518450685 -0.1859947263 -0.0102210286 -0.0011210955 0.0025031928 0.1148302742 0.0550160541 0.1762946087 0.0332070060 0.0159244001 -0.1551102768 0.0182924489 0.0285709780 0.1049462203 0.0287666917 -0.0791917445 -0.1342138762 -0.0316183301 0.0149114137 -0.0054294811 0.0460717840 0.0508754735 0.1429366800 0.0057579756 -0.0619518478 -0.0920421223 -0.0736769803 0.1840660077 0.1370118327 -0.1706881669 -0.0722599204 -0.2606574101 0.0116998244 -0.0042457391 0.0018849299 -0.1413794361 0.1580109252 0.2395038231 -0.1035396611 0.0140751291 -0.2222314241 0.0023638066 0.0020608417 0.0136532300 -0.0039880230 -0.0031256750 -0.0137768567 0.0003052302 0.0035220849 0.0166584074 0.0019606823 -0.0059392440 -0.0161871245 -0.0206360271 -0.0034829737 0.0137285216 -0.0454500603 0.0243450509 0.0303818701 -0.0232461707 -0.0211157416 -0.0244626969 0.0357637838 -0.0473085294 0.0333152385 0.0337772328 -0.0332891727 0.1824092123 -0.1719550919 -0.0815687300 -0.2292771495 0.0324693555 0.0381115679 0.0295432923 0.0165824287 0.0325165008 -0.0742307452 -0.1347006079 0.0705218736 -0.1852261108 0.2162773813 0.0091975541 0.2519047927 0.0371417114 0.0026698801 0.0272184862 0.0162953593 -0.0093986726 0.0097844940 -0.0057237645 0.0388311183 0.0068572384 -0.0145464009 0.0293438394 -0.0344732367 0.0465886428 0.0361464935 -0.0569406881 -0.0859918585 0.0420074158 0.0817178063 0.0062366443 -0.0146716469 -0.0084955734 -0.0292478772 -0.0290587334 0.0071678239 0.0043830693 -0.0168457332 0.0775237206 0.0500202733 -0.0967882098 -0.0833666215 -0.0013738205 0.0027618175 -0.0001999962 0.0046551301 -0.0041517366 0.0026381057 -0.0032086293 -0.0085104188 -0.0105916593 0.0055239957 0.0011376713 0.0110631461 0.0013027019 -0.0002337282 -0.0000310586 -0.0038059443 -0.0009300578 0.0003260896 -0.0000225254 0.0017101215 -0.0004157432 0.0035595643 0.0031999293 -0.0020387725 -0.0042464083 -0.0064257909 0.0040421885 0.0274313031 -0.0074165952 0.0070021293 -0.0013775411 -0.0003322566 -0.0062346579 0.0142672477 -0.0010388608 0.0041937765 0.0047767944 0.0020323520 -0.0046763125 -0.0066426318 0.0068086295 -0.0033819521 -0.0091267592 0.0078712225 -0.0034613146 -0.0020961144 -0.0005394868 0.0002731196 0.0041909542 -0.0074425736 0.0017275682 -0.0172875240 0.0013030405 -0.0110895379 0.0096718278 0.0025239463 0.0032983635 -0.0076039709 0.0054549427 0.0029714374 -0.0005581460 -0.0005328927 0.0000346298 0.0005843352 -0.0011767836 0.0002509916 -0.0001607665 0.0001876521 0.0011614271 -0.0002968769 0.0000500210 0.0004583296 0.0002428188 -0.0000824216 0.0002440156 -0.0000649997 0.0000927835 0.0001034262 -0.0001104623 0.0000789213 -0.0000904585 -0.0000557445 0.0000272873 0.0001184723 0.0001742321 -0.0000942043 -0.0000249666 -0.0001210066 0.0000900983 -0.0001479856 -0.0000026584 -0.0001766264 -0.0000404059 -0.0002171304 0.0000251453 0.0000047961 -0.0005784795 0.0005503925 -0.0006015702 0.0001916108 -0.0005253991 -0.0001062102 0.0001386320 0.0001428142 0.0000041240 -0.0000550562 -0.0001655340 0.0000417092 0.0001389661 -0.0004379314 -0.0000209064 -0.0000042473 -0.0000529177 -0.0001743598 0.0001839512 -0.0004130291 -0.0005507049 0.0004222031 0.0003683082 0.0001794825 -0.0005098434 -0.0000362991 0.0003318461 -0.0000746970 0.0001523888 0.0000222058 -0.0001322154 0.0001190605 0.0000090924 0.0005372538 0.0001774996 0.0003442773 0.0004343318 -0.0009338266 0.0009542696 0.0004425376 -0.0007270166 0.0003388414 0.0006380139 -0.0007598702 0.0003241813 -0.0008716357 0.0014229192 -0.0010363083 0.0000261061 0.0001287550 -0.0000454742 0.0006335053 -0.0016046807 0.0001066021 0.0115088867 -0.0091926343 0.0036593736 0.0001174244 0.0002715211 -0.0001723836 0.0001693165 0.0002773714 0.0003124627 0.0002251363 0.0005444264 0.0001658494 -0.0003459876 -0.0004240411 0.0001294098 0.0002268083 0.0002217114 -0.0000668145 0.0003730620 0.0002763701 -0.0000888270 0.0001290052 0.0001706864 -0.0000759673 -0.0000116943 -0.0002318525 -0.0003297627 -0.0002821192 0.0000081793 0.0002089779 -0.0001412022 0.0003827656 -0.0005394001 0.0000108131 0.0002699253 -0.0012241406 -0.0002311190 -0.0008189459 0.0013762623 0.0005647029 0.0002625926 0.0003107466 -0.0020716175 -0.0012630614 -0.0005929645 0.0013350055 -0.0000532405 0.0001298119 -0.0004641268 0.0001518177 0.0004600453 0.0001593659 -0.0005312929 -0.0001621019 0.0003360304 -0.0006543125 -0.0005352222 0.0003757349 0.0001512322 0.0000004347 0.0003340121 0.0001912647 -0.0001279198 -0.0005768291 0.0004053300 0.0009004628 -0.0084335166 -0.0016382929 0.0019325804 0.0016707742 -0.0068570478 -0.0105094634 0.0057966493 0.0116829047 0.0140755222 -0.0045855077 -0.0009616529 0.0010690728 0.0039816373 -0.0095833622 -0.0163429099 0.0024942189 0.0080966500 0.0092858888 -0.0188384375 -0.0081903373 -0.0187587786 -0.0085935433 0.0053194189 0.0340766118 0.0017666722 0.0002543094 -0.0004603480 -0.0200915767 -0.0112824695 -0.0279500887 -0.0081176216 0.0001291690 0.0265372856 -0.0061025914 -0.0101346946 -0.0367691908 -0.0073702514 0.0234701506 0.0422925827 0.0101732180 -0.0047478068 0.0018024036 -0.0130473914 -0.0169779943 -0.0442196518 -0.0017272250 0.0215002560 0.0320134101 0.0261750096 -0.0663298890 -0.0483156154 0.0635472572 0.0196577449 0.0878887718 -0.0037664424 0.0013464948 -0.0005938587 0.0529271584 -0.0556761007 -0.0776840415 0.0368402265 -0.0054983033 0.0785684893 -0.0003269791 -0.0003481909 -0.0023576876 0.0006816803 0.0005098773 0.0022759754 -0.0002174094 -0.0010245382 -0.0052453566 -0.0007222435 0.0019249892 0.0050283552 0.0039862527 0.0030549388 0.0037798395 0.0007682084 -0.0069278218 -0.0143448708 -0.0273520587 0.0062838253 -0.0408065309 0.0448060400 -0.0195032072 0.0672745897 0.1092709758 -0.0200801935 0.2691061909 -0.2318626206 0.0137638889 -0.3925078151 0.0373361161 -0.0000730877 0.0707953923 -0.0494745424 0.0119371934 -0.0908176146 -0.3121828923 0.0577233080 -0.3681556985 0.3022445699 -0.0334042292 0.4993291734 -0.0098364070 -0.0001901898 -0.0040462353 -0.0040512809 0.0008859263 -0.0033790206 0.0067092438 -0.0106394552 -0.0134901421 -0.0033595426 -0.0091413463 0.0253656331 -0.0687756194 -0.0015682834 0.0778354702 0.0725288855 -0.0242575929 -0.1070700223 -0.0062616999 0.0062836363 0.0094861114 0.0163050249 0.0090121746 -0.0134702788 0.0171748383 0.0052241770 -0.0682301212 -0.0518770517 0.0357015783 0.0910492645 0.0007553851 -0.0009927961 -0.0000235114 -0.0014535252 0.0020864088 -0.0000362303 0.0008468426 0.0032967404 0.0042513888 -0.0026539652 -0.0009683953 -0.0046402894 -0.0007315641 0.0004457675 -0.0002167090 0.0042521228 0.0008327925 -0.0008558993 -0.0000459388 -0.0017206030 0.0006403480 -0.0024841070 -0.0023186357 0.0015635738 -0.0014157186 -0.0016071020 0.0010082263 0.0075963436 -0.0024937053 -0.0005967234 0.0001259889 -0.0007029819 -0.0011625776 0.0061680731 -0.0017492059 -0.0015935561 0.0036204578 0.0020494109 -0.0016173446 -0.0009509091 0.0041312401 -0.0031190727 -0.0067979413 0.0008426292 0.0069497769 0.0002262657 -0.0025821345 -0.0045845336 -0.0039252885 0.0019433702 0.0008194643 -0.0080214698 -0.0025474488 0.0051178342 0.0017488745 0.0001477425 0.0011023457 -0.0045158643 0.0030038441 0.0012814313 0.0005621414 -0.0001232317 0.0001398933 0.0000768141 -0.0001248013 0.0003834857 -0.0004263795 -0.0005115345 -0.0000962631 0.0002381137 -0.0008392066 0.0006602086 0.0007444129 -0.0005751138 0.0003917400 -0.0001148756 0.0000611943 -0.0000396969 0.0000334622 -0.0000897986 -0.0000215262 -0.0000704996 0.0000157780 0.0000506105 0.0002930659 -0.0001778783 0.0001140349 -0.0003156163 0.0002722495 -0.0001492685 0.0001032973 -0.0000256912 -0.0000008911 0.0001121891 -0.0000629819 0.0001750400 -0.0012258858 0.0011033898 -0.0009449720 0.0018758542 -0.0013842537 0.0010358583 -0.0001134573 0.0001510286 -0.0001033727 0.0001136767 -0.0000935191 0.0001830931 -0.0007293507 0.0018742686 -0.0008565606 -0.0000411122 -0.0000054800 -0.0001486094 -0.0001750755 -0.0000452934 -0.0011056278 0.0008987781 0.0010339733 0.0003178192 -0.0011060016 -0.0004334640 0.0007331888 0.0003868320 0.0000068670 0.0000976089 -0.0000711380 -0.0004045011 0.0001933117 0.0022588500 -0.0004596209 0.0003076313 -0.0009246189 -0.0011156732 0.0005758380 -0.0002978552 0.0014783623 -0.0011635936 -0.0015227722 0.0010137812 -0.0007052067 0.0006333379 -0.0014498593 -0.0008195027 -0.0000794980 -0.0000429105 -0.0000583807 0.0006067452 -0.0003510329 0.0001272456 0.0004766152 -0.0009092816 0.0007752499 -0.0000560202 0.0001946645 -0.0000349617 0.0001875285 -0.0000207947 -0.0000887319 -0.0000250191 -0.0000025533 -0.0000527847 -0.0001174486 -0.0000759087 0.0000672895 0.0000733907 0.0000619039 -0.0000765275 0.0001311685 0.0001171367 -0.0000314964 0.0000619244 0.0000536668 -0.0000507277 -0.0000144489 -0.0000207866 -0.0000161161 -0.0000329651 0.0000384198 0.0000424291 0.0000384603 0.0001652751 -0.0001478105 0.0000918356 0.0000753525 -0.0004399760 -0.0001589058 -0.0003250531 0.0006126665 0.0001574125 0.0000649453 0.0000392898 -0.0006278068 -0.0006640367 -0.0002774378 0.0003161678 0.0000596173 -0.0000695227 -0.0000901911 0.0000477794 0.0000731264 0.0001064948 -0.0002333073 -0.0001448665 0.0000745909 -0.0001664209 -0.0001669246 -0.0001896812 0.0000206589 0.0002051379 -0.0001566628 0.0000136231 0.0001192229 0.0000200270 -0.0000470472 0.0000042152 -0.0046276183 -0.0019602478 0.0016885064 0.0008306116 -0.0067452431 -0.0141201011 0.0052432091 0.0099334821 0.0152704318 -0.0049116813 -0.0007012540 0.0008830450 0.0026507701 -0.0102563785 -0.0157806601 0.0029480677 0.0104470746 0.0116738393 -0.0209609779 -0.0230533509 -0.0184949179 -0.0182746643 0.0138865196 0.0338245447 0.0018721616 0.0000681254 -0.0004223812 -0.0294209029 -0.0144617646 -0.0301475260 -0.0099913502 -0.0003852966 0.0342669796 -0.0039187387 -0.0069168042 -0.0223171588 -0.0010219799 0.0096834352 0.0203033339 0.0052120541 -0.0024574159 0.0010785393 -0.0045312741 -0.0091734078 -0.0206532410 -0.0010356112 0.0123983747 0.0192897553 0.0184198393 -0.0390038111 -0.0314012480 0.0429567614 0.0036619641 0.0512707633 -0.0019555067 0.0007313708 -0.0003279747 0.0347178048 -0.0346731392 -0.0398554653 0.0249991540 -0.0024561246 0.0479914960 -0.0002670336 -0.0002796841 -0.0023382152 0.0008309696 0.0005881805 0.0022711928 -0.0002683823 -0.0004260975 -0.0026319351 -0.0004760603 0.0009928415 0.0023854573 0.0019353970 -0.0002519872 -0.0001696859 0.0033872720 -0.0035998449 -0.0056415577 -0.0020170561 0.0055459438 -0.0052132736 0.0053378320 0.0006519069 0.0097651705 0.0180387874 0.0018729409 0.0306604316 -0.0269341517 0.0113943992 -0.0532385644 0.0079610165 -0.0019514077 0.0141540471 -0.0145180398 -0.0017338268 -0.0114626524 -0.0497811863 0.0071243965 -0.0676155426 0.0426177529 -0.0125670347 0.0832699533 0.0062200093 -0.0054441833 -0.0108941718 0.0018474103 0.0030029652 0.0041289176 -0.0375363203 0.0199368640 0.0795672126 0.0448386513 0.0077799333 -0.0997955704 0.3677764188 -0.0306400927 -0.4101901199 -0.3116631816 0.0700631347 0.5205915388 0.0254498390 -0.0070417265 -0.0337466543 -0.0521702723 -0.0166066818 0.0588321403 -0.0700813578 -0.0007025669 0.2477868458 0.2037492007 -0.0775120861 -0.3656269787 -0.0001100240 -0.0001855876 0.0000820479 -0.0004525853 -0.0002028721 -0.0008534481 0.0004145040 0.0003549662 0.0003438196 0.0001621768 0.0003254253 -0.0001704275 0.0001649592 -0.0002268253 0.0001743817 -0.0018158511 -0.0003199208 0.0004878822 0.0001440005 0.0008162583 -0.0004051333 0.0005620947 0.0005433955 -0.0004901916 0.0075120202 0.0038298453 -0.0020204520 -0.0067984588 -0.0076979801 0.0007339230 0.0008961564 -0.0086436468 -0.0014543592 0.0047225096 0.0315709875 0.0122478913 0.0149624774 0.0164952697 -0.0085447450 -0.0057823521 -0.0105197541 -0.0006399302 -0.0324490298 -0.0120023350 -0.0162023449 0.0015044978 0.0091767461 0.0006174237 0.0220009195 -0.0332612078 0.0077905627 -0.0621107967 0.0166474875 -0.0250010565 0.0296675498 0.0121362161 0.0057756497 0.0029505086 -0.0053705616 0.0026359987 -0.0037190365 -0.0007107588 -0.0002683392 -0.0007278588 0.0016452880 0.0017280559 -0.0018390751 -0.0022009195 0.0004338277 0.0002988171 -0.0010292394 0.0000303650 0.0039922252 -0.0051323538 0.0044166527 -0.0011941566 0.0007479436 0.0002809653 -0.0003924526 -0.0003064503 -0.0002971750 -0.0004683273 -0.0000988897 0.0005337971 0.0027962748 -0.0008973217 0.0008736367 -0.0020884090 0.0017093539 -0.0017613736 0.0005031011 -0.0006163921 0.0000389590 -0.0020485595 -0.0005057908 -0.0008727174 -0.0105572993 0.0103502066 -0.0071635823 0.0125487925 -0.0138798079 0.0048786070 0.0004243000 0.0006123501 -0.0003149812 -0.0005933327 0.0004495961 0.0003142563 0.0037250762 -0.0119688304 0.0095466480 0.0004492996 -0.0000592924 0.0002076445 0.0006541036 -0.0009609488 -0.0017374323 0.0000964045 0.0012667915 0.0002024896 -0.0012002651 0.0001735519 0.0009182772 -0.0011833704 -0.0006092040 -0.0001685319 0.0007482856 0.0005730662 -0.0003422870 0.0028367035 -0.0033246129 0.0027273269 0.0009929966 -0.0017220729 0.0027516832 -0.0022046159 -0.0010486514 0.0022193916 0.0025690967 0.0006962487 0.0016090403 -0.0014959956 0.0049388695 -0.0034650635 0.0003826157 0.0003433939 0.0001592850 -0.0044048813 0.0006816955 0.0004076576 0.0158938754 -0.0010287474 -0.0023106126 0.0003907644 -0.0005886544 -0.0004267368 -0.0003250612 0.0005435977 0.0007327706 0.0003660329 0.0008044134 0.0003744151 0.0002303943 -0.0002692537 -0.0003388521 -0.0001694299 0.0000101927 0.0002370123 -0.0006763914 -0.0001252184 0.0000787957 -0.0000143540 -0.0000149451 0.0001569908 0.0001771607 -0.0005268359 -0.0007530409 -0.0006034122 0.0000040686 0.0004799112 -0.0003254682 -0.0010673422 0.0005225319 -0.0006395644 0.0000247560 0.0004248544 0.0006326905 0.0004655575 -0.0016876807 -0.0010187086 -0.0004406435 -0.0002710499 0.0033986673 0.0026720189 0.0010354539 0.0008384407 -0.0006639285 0.0011828548 -0.0006958403 0.0001069835 0.0004493058 -0.0000278785 0.0002562667 0.0001053010 -0.0006585176 0.0005936747 0.0005027732 0.0011681761 0.0003191599 -0.0004034147 0.0011402884 0.0003924916 -0.0005187162 -0.0012123319 0.0008937764 0.0019037971 -0.0152716046 -0.0131080090 0.0102040652 0.0050052980 -0.0577935655 -0.1275267163 0.0344692795 0.0718136850 0.1219774599 -0.0403105716 -0.0050099040 0.0068612714 0.0146914853 -0.0830400188 -0.1201575399 0.0256598124 0.0927336887 0.1035292678 -0.1844882836 -0.2253751077 -0.1589891422 -0.1881019122 0.1256659103 0.2797409228 0.0153051565 0.0002106826 -0.0033769537 -0.2726518617 -0.1270099040 -0.2449769443 -0.0937890145 -0.0029198635 0.3095587643 0.0166212256 0.0314360287 0.1083457705 -0.0003184793 -0.0356401160 -0.0869536084 -0.0230824600 0.0103291375 -0.0047097912 0.0147010545 0.0430986237 0.0846312498 0.0034358589 -0.0612479998 -0.0920325717 -0.0830779304 0.2041217004 0.1475627465 -0.2187516616 -0.0102215848 -0.2351645712 0.0086254933 -0.0030067471 0.0013577468 -0.1809235627 0.1652974127 0.1797255867 -0.1182126055 0.0197890502 -0.2384035714 -0.0016562843 -0.0020690004 -0.0183210529 0.0070399154 0.0047491499 0.0174671763 0.0015075703 0.0014793236 0.0109214015 0.0023510030 -0.0043554497 -0.0097403220 0.0015061477 0.0010923215 -0.0005856149 -0.0118499537 0.0193803159 0.0037299779 -0.0050710661 -0.0197217964 -0.0042172024 0.0007226936 0.0050085749 0.0098489486 0.0164416839 -0.0252241644 0.0168361280 -0.0200133719 0.0169510108 -0.0405698788 0.0035266788 -0.0099735861 0.0112695976 0.0062622798 0.0054739868 -0.0180106806 -0.0398147931 -0.0030938371 -0.0598446527 0.0481634462 0.0030513568 0.0536589164 -0.0394799838 -0.0175006485 -0.0221188895 -0.0083879680 0.0046436581 -0.0043630511 -0.0001838986 -0.0106082564 0.0019368665 0.0252973335 -0.0264315839 0.0162855829 0.0086738171 -0.0141830703 -0.0015674540 0.0220869182 -0.0330337545 0.0188308435 0.0032557253 0.0290146405 0.0003072278 0.0053068756 0.0113868750 0.0012482750 -0.0063596019 0.0318402336 -0.0036416162 -0.0036393082 0.0378110765 -0.0017414762 0.0004605961 0.0011774300 -0.0004239070 0.0028855670 0.0008606278 0.0051677128 -0.0022112541 -0.0028703947 -0.0030771108 0.0001387162 -0.0014001574 0.0024371333 -0.0007390008 0.0004144237 -0.0009985789 0.0057964381 0.0016418555 -0.0010984156 -0.0030530275 -0.0034139148 0.0024876132 -0.0005210487 -0.0009506455 0.0018447808 0.0160364202 0.0131608813 -0.0052716034 -0.0339994369 0.0061401948 0.0169275553 -0.0002291664 -0.0014721607 -0.0002342618 -0.0151946856 -0.0063911748 0.0029956402 -0.0076357509 0.0000215729 0.0039329581 0.0085594724 -0.0021121292 0.0044902476 0.0111728085 -0.0123837390 0.0016762126 -0.0005585307 -0.0016599681 -0.0004921203 -0.0106175490 0.0165294307 -0.0042429209 0.0320009754 -0.0053219325 0.0153770361 -0.0099512659 -0.0033561893 -0.0051093449 0.0113132877 -0.0082809960 -0.0038195264 -0.0026331296 0.0001479818 0.0016486708 -0.0008972558 0.0018694293 -0.0010181573 -0.0001606996 -0.0011344648 -0.0038086649 0.0073312478 -0.0245085117 0.0079453093 -0.0015025130 -0.0028336398 0.0033606739 -0.0006888928 0.0005140834 0.0012058299 -0.0012638433 0.0027479068 0.0041247552 0.0020851994 0.0003319963 -0.0028627402 -0.0011281567 -0.0020144984 0.0000828185 0.0002504191 0.0001627693 -0.0011982519 -0.0002962266 -0.0003641195 0.0005604410 0.0004649404 -0.0015899568 -0.0050375558 -0.0031275896 -0.0004906483 -0.0008321988 -0.0005055783 -0.0076989354 -0.0038812380 0.0009356986 0.0026095336 0.0018298840 -0.0062744601 0.0032162300 -0.0033619681 0.0162479438 -0.0538658817 0.0303023152 0.0084109398 -0.0092750984 0.0067624743 -0.0425954905 0.0634436619 0.0168186766 -0.0120176421 -0.0113086707 -0.0107943640 -0.0351589193 0.0787123559 -0.0350225646 0.0707816486 -0.0858476449 0.0204897910 0.0113218375 -0.0271102358 0.0066768312 0.0145584419 -0.0387162517 -0.0206548611 0.3187664685 -0.4595186139 0.0551355597 -0.3389721136 0.5190247253 -0.1436701369 -0.1223287906 0.1326821271 -0.0494781443 0.2119993912 -0.3249148386 0.1119603280 0.0004711559 0.0009715317 0.0003329433 0.0065873968 -0.0057652221 -0.0004387672 -0.0134745973 0.0075018970 -0.0023526145 0.0047227695 -0.0055302760 0.0004648335 -0.0026710723 0.0044861930 0.0053764574 0.0028983822 0.0029897637 0.0013892531 -0.0016073176 -0.0012790822 -0.0007532625 0.0004882106 0.0004996150 -0.0001867366 0.0026260269 -0.0003355640 0.0011776931 0.0007537948 0.0002435716 0.0002492451 0.0001365922 -0.0023480677 -0.0024740358 -0.0026649025 -0.0005498852 0.0009377036 -0.0007441863 -0.0010961047 -0.0006272648 -0.0018306899 0.0005838828 -0.0005678892 -0.0002817285 -0.0013382677 0.0023029888 -0.0015313367 0.0004430256 -0.0070292382 0.0088284140 0.0001645424 0.0012028763 -0.0168278098 0.0056003754 0.0020207313 -0.0026933968 0.0009128326 0.0005985959 0.0014751291 -0.0011242294 -0.0017322861 -0.0010924305 -0.0007418202 -0.0003441436 0.0074926499 0.0015670985 -0.0034289975 0.0085629890 0.0013464943 -0.0053575490 -0.0068088040 0.0052091181 0.0105868505 0.0158624754 0.0035056282 -0.0033181884 0.0004887875 -0.0085465750 -0.0177004507 -0.0049875856 0.0009695955 0.0066599495 -0.0036741220 -0.0006512621 0.0010169053 -0.0043994908 -0.0062756436 -0.0028797040 0.0034185148 0.0122209978 0.0142258309 -0.0313289378 -0.0349443861 -0.0245662414 -0.0374155393 0.0039982592 0.0325189017 0.0015163801 0.0004619889 -0.0001927404 -0.0437506291 -0.0156418246 -0.0179737361 -0.0193332284 0.0003047655 0.0482470050 -0.0024191049 -0.0048797882 -0.0155091785 0.0048574651 -0.0017663399 0.0050595037 0.0018367953 -0.0007911256 0.0004769277 0.0033060238 -0.0049835152 -0.0028312830 -0.0006527740 0.0083539191 0.0133521474 0.0152556769 -0.0327258710 -0.0233348314 0.0395677008 -0.0085416586 0.0301096930 -0.0008440659 0.0003029199 -0.0001748425 0.0336765136 -0.0270267850 -0.0164957834 0.0223055066 -0.0020746873 0.0370137448 0.0002291024 -0.0000264335 -0.0017152122 0.0008469513 0.0003380103 0.0011628036 -0.0003687863 0.0000342976 -0.0009455490 -0.0004037356 0.0004781236 0.0007080658 -0.0063926835 -0.0015113874 0.0031903425 -0.0118148137 0.0037860396 0.0092273613 -0.0033469248 -0.0043978317 0.0020824395 0.0036526033 -0.0157819387 -0.0045576151 -0.0267143620 0.0004555230 0.0105165093 -0.0122786742 -0.0425673188 0.0099644803 0.0005549652 0.0146748730 -0.0032919631 0.0147369431 0.0100297840 -0.0046730747 0.0059269651 0.0161477803 0.0244243623 0.0050413723 0.0201511974 -0.0187581475 0.0097372249 -0.0014452447 0.0076996686 0.0043440520 -0.0038181390 0.0025102406 0.0036191483 0.0131481570 -0.0038041209 -0.0086936418 0.0103797345 -0.0020245997 -0.0080611163 0.0160580985 0.0243428685 0.0031725674 0.0124029988 -0.0207261408 0.0016531221 -0.0017366646 0.0017670243 -0.0065294715 -0.0112055336 -0.0043241326 0.0209086415 -0.0040219770 0.0066526934 -0.0019830605 -0.0380144225 0.0105043866 0.0014126437 0.0094409049 -0.0054636895 0.0226691887 0.0020085795 0.0365476132 -0.0219302417 -0.0296645538 -0.0325701916 0.0029223955 -0.0116917837 0.0225659798 -0.0051501109 0.0050033074 -0.0072698526 0.0323538854 0.0034599706 -0.0159894750 -0.0135613216 -0.0248324638 0.0153103343 -0.0058739142 -0.0116778105 0.0204360279 -0.0767066363 -0.0621411242 0.0254170550 0.1581774321 -0.0268160313 -0.0789683170 0.0002253500 0.0086421328 0.0019315899 0.0717581129 0.0348390327 -0.0116969719 0.0401284107 -0.0042365283 -0.0205483349 -0.0381304146 0.0130254506 -0.0186121883 -0.0573059219 0.0569525003 -0.0120286345 0.0008728868 0.0061833218 0.0013720481 0.0528225908 -0.0825551958 0.0207367467 -0.1639697598 0.0245225346 -0.0771958449 0.0613519647 0.0212708210 0.0204771180 -0.0497108532 0.0384908770 0.0201189903 -0.0011065551 -0.0018796109 0.0021511558 0.0024049604 -0.0030383822 0.0039465289 -0.0062774234 -0.0054485427 0.0005508667 0.0018655857 -0.0140256274 0.0100149115 -0.0011890046 0.0029846336 -0.0014613442 0.0004217047 0.0000640824 0.0005598823 -0.0005134019 0.0017798840 0.0010615653 0.0002875032 0.0000865793 -0.0004320054 -0.0017601138 0.0000103004 -0.0009307945 0.0012599863 -0.0013956478 0.0009821233 -0.0001147418 -0.0003574983 -0.0001939029 0.0005108453 -0.0013165691 -0.0006660900 0.0065512164 -0.0068619222 0.0022104033 -0.0128719486 0.0074231328 -0.0072972824 0.0009372440 0.0016021222 0.0006855313 -0.0017174034 0.0004991145 -0.0010584375 0.0058223025 -0.0169526205 0.0074437108 0.0028841223 -0.0035514844 0.0021005486 -0.0162769887 0.0239815386 0.0060896108 -0.0037308475 -0.0044173869 -0.0036691796 -0.0144053785 0.0305687650 -0.0133441066 0.0277311352 -0.0328550235 0.0079860366 0.0037931397 -0.0103395650 0.0026369563 0.0047012473 -0.0123777923 -0.0082614487 0.1265906568 -0.1802643523 0.0245016408 -0.1297414034 0.2009071263 -0.0573240721 -0.0468396787 0.0492218169 -0.0192270783 0.0803755330 -0.1247165508 0.0425618308 -0.0000257249 0.0007588302 -0.0000699118 0.0081417299 -0.0121941045 0.0016885421 0.0682224767 -0.0378872245 0.0114321656 0.0019727104 -0.0018951784 0.0002204201 -0.0007318940 0.0020085793 0.0021144463 0.0011503929 0.0012095773 0.0005351044 -0.0007672280 -0.0006659639 -0.0005488784 0.0003440248 0.0002791335 -0.0000189671 0.0003681661 0.0001386443 0.0005760597 0.0005569846 0.0001653583 0.0003249772 0.0002803866 -0.0011295025 -0.0013902005 -0.0014335849 -0.0000568430 0.0008272938 -0.0005528526 -0.0007925094 -0.0004207763 -0.0012355865 0.0003017782 0.0000382611 -0.0000184093 -0.0009985869 0.0013790503 -0.0010800854 0.0004619919 -0.0030757110 0.0067095887 0.0012913566 0.0009911048 -0.0031039624 0.0010197745 0.0015866357 -0.0017843034 0.0006532170 0.0004458434 0.0012866096 -0.0009745704 -0.0016092127 -0.0011934364 -0.0001601061 0.0000870111 0.0028169241 0.0008067369 -0.0010408618 0.0033025818 0.0007086492 -0.0018440294 -0.0030602810 0.0022044150 0.0046289046 -0.0740837678 -0.0157878370 0.0159673206 -0.0007360026 0.0388724600 0.0869018980 0.0208807072 -0.0033959621 -0.0373385774 0.0170931104 0.0018585755 -0.0030757778 0.0221688712 0.0288090437 0.0182798948 -0.0181500766 -0.0581151112 -0.0713838984 0.1474888983 0.1840900361 0.1118989914 0.1932063108 -0.0473119509 -0.1497744146 -0.0074904993 0.0000561715 0.0017510998 0.2266913561 0.1000070505 0.0876832997 0.0915797903 -0.0199874874 -0.2163762585 0.0121947100 0.0237867557 0.0746354693 -0.0251673290 0.0105475224 -0.0215126644 -0.0088628938 0.0038600196 -0.0025773069 -0.0175193556 0.0229153651 0.0109686512 0.0028684218 -0.0397819342 -0.0637722627 -0.0744690542 0.1541621661 0.1137863266 -0.1902821291 0.0476888285 -0.1449201404 0.0039092613 -0.0014407321 0.0006201086 -0.1582337221 0.1298094955 0.0735643069 -0.1076065273 0.0115709107 -0.1787576849 -0.0009273997 0.0003383864 0.0070818103 -0.0042440040 -0.0021487367 -0.0058537489 0.0019176380 -0.0004252180 0.0035453619 0.0019899738 -0.0019512862 -0.0022433265 0.0291348039 0.0084322876 -0.0145031816 0.0529835605 -0.0133775064 -0.0418776694 0.0154114432 0.0151240582 -0.0100920313 -0.0171670628 0.0747911550 0.0215226303 0.1269156734 -0.0083988491 -0.0513586427 0.0603375434 0.2037134038 -0.0480564310 -0.0028498300 -0.0714370477 0.0158818052 -0.0664793613 -0.0452710931 0.0203722050 -0.0283338133 -0.0784076393 -0.1170073553 -0.0216363828 -0.0886896222 0.0879516251 -0.0553494644 0.0034188071 -0.0411571093 -0.0240615227 0.0178703569 -0.0140346775 -0.0190971412 -0.0646015887 0.0178986130 0.0481017969 -0.0599598517 0.0138988426 0.0338134270 -0.0789460086 -0.1255406878 -0.0168967484 -0.0817895133 0.1024384915 -0.0077194675 0.0183638220 -0.0088504890 0.0352790901 0.0589913804 0.0222443129 -0.1097782277 0.0309973527 -0.0373491760 0.0112183521 0.1954078199 -0.0499496353 0.0004626353 0.0033072210 -0.0020845143 0.0079636911 0.0007657399 0.0129857076 -0.0080375928 -0.0110432070 -0.0120668801 0.0009639148 -0.0042146902 0.0077586815 -0.0022766674 0.0018136198 -0.0025339878 0.0119528388 0.0006847922 -0.0063874781 -0.0046009372 -0.0093751417 0.0055154167 -0.0025966437 -0.0044852728 0.0077727977 0.0010314994 0.0005773648 -0.0002220524 -0.0024640618 0.0001347384 0.0015073980 -0.0001686996 -0.0003690444 -0.0001175875 -0.0005462614 0.0014127003 0.0007789424 0.0010833549 -0.0003901872 -0.0008070423 0.0018854061 0.0007986816 0.0012144231 -0.0008232418 -0.0011721966 -0.0005846886 -0.0001328686 -0.0000489553 -0.0000088162 0.0005306447 -0.0007674499 0.0001362838 -0.0020908855 0.0001292178 -0.0010136577 -0.0014550419 -0.0003856056 0.0007310703 -0.0003725765 0.0007197623 0.0002945581 0.0069023367 0.0040230744 0.0023865527 -0.0022412649 0.0028498509 0.0023292187 -0.0078652793 -0.0121570424 -0.0086722703 -0.0203911605 0.0782367972 -0.0680075626 0.0032745050 -0.0010550361 -0.0118638385 0.0015000842 -0.0039172313 -0.0082198806 0.0034834484 -0.0008194507 0.0089905477 0.0106449282 0.0053977435 -0.0102044529 -0.0110194798 -0.0118333691 0.0028029582 0.0012746019 0.0051601229 0.0004998724 -0.0020695708 0.0023069607 0.0029652766 0.0239476539 0.0282634087 0.0064909437 -0.0220037640 -0.0056972436 0.0235240195 0.0253322934 0.0278451083 0.0260601891 -0.0158990410 -0.0021883551 0.0068068103 0.0195971380 0.0010587089 0.0194612091 -0.0523632154 0.1954868030 -0.1086072164 0.0014080216 -0.0001249246 -0.0175704495 -0.0001699354 0.0364778908 0.1587392171 0.0131894877 -0.0029892363 -0.0613643714 -0.0070269542 -0.0311298819 -0.0509358509 0.1217779505 0.0958534486 -0.0081907072 -0.1283118956 -0.0806594379 0.0475962346 0.1464373261 -0.0110725847 -0.3351272893 -0.1813769307 -0.1175586601 -0.3142675479 0.3274726909 0.0645569238 -0.3658420881 -0.3038936466 -0.2450796787 -0.2275438112 -0.0157660006 0.0477352884 0.1744974240 -0.0004251027 -0.0026666027 0.0010530427 -0.0109824790 0.0305883910 -0.0057411768 0.0007229057 -0.0003890042 0.0000994071 -0.0103461011 0.0189697323 -0.0005538206 0.0104361979 -0.0109993367 -0.0151077391 -0.0082869733 -0.0131619565 -0.0051474225 0.0038961471 0.0065748649 -0.0002612953 -0.0024785170 -0.0024618066 0.0005260575 -0.0016317561 -0.0021777891 0.0014875211 -0.0018576514 -0.0016165972 0.0004717946 0.0015149860 0.0049355969 0.0044580503 0.0045408034 0.0034728947 0.0010906663 0.0048484014 0.0025034883 0.0060404513 0.0060186338 -0.0031717793 0.0089920784 -0.0002702942 0.0058099281 -0.0076512973 -0.0033101482 0.0037321164 -0.0077410004 0.0066120930 0.0007900944 0.0020631699 -0.0103438428 0.0006946842 -0.0087277779 0.0080788871 -0.0020082527 -0.0065915633 -0.0019355854 0.0049330019 0.0012600387 -0.0000476297 0.0040028631 0.0035284784 -0.0257392140 -0.0030303830 0.0127395132 -0.0253944657 -0.0041289836 0.0178640247 0.0174477476 -0.0145022980 -0.0305058667 0.0004979131 0.0000974466 0.0001641959 -0.0008444020 0.0001242991 -0.0016739083 0.0006380730 -0.0005883661 0.0017503418 0.0006930897 -0.0001205295 0.0002860180 -0.0011487059 0.0012909321 -0.0024804526 0.0012099572 -0.0005991037 0.0016281760 -0.0013970336 -0.0083531924 0.0007243692 -0.0063376500 0.0093177220 -0.0009861822 0.0000463614 0.0004801411 0.0006996668 0.0003495055 -0.0169920325 0.0045920298 -0.0065708399 0.0088151321 -0.0008052488 0.0000585582 0.0002169477 0.0000726915 -0.0004709752 -0.0000262274 0.0000391591 0.0005294568 -0.0001736798 0.0000459778 -0.0002718159 0.0001322074 -0.0000420131 0.0001633638 0.0000549816 -0.0001152401 -0.0017399115 0.0005869087 0.0009929394 -0.0005986089 0.0021328603 -0.0020097131 -0.0001481366 -0.0000463078 -0.0000466012 -0.0016163825 0.0021432157 0.0004412509 -0.0017194134 -0.0011081073 -0.0000903629 0.0000876304 0.0002769428 -0.0004813378 -0.0003028597 -0.0003798068 -0.0001054407 -0.0000085008 0.0000630687 0.0003166941 0.0000073830 -0.0000380766 -0.0002514013 -0.0002498795 0.0000685897 0.0002119743 -0.0010458469 0.0013782608 0.0006530876 -0.0002850130 -0.0013718304 -0.0000510502 0.0000869539 -0.0001771446 0.0000675546 -0.0003411186 -0.0014071403 0.0003929648 -0.0002541540 -0.0002331231 -0.0005237734 0.0000039544 -0.0001761792 0.0002160979 0.0010206086 0.0005955975 -0.0007364173 0.0000158501 -0.0001685316 -0.0014115762 0.0013540647 0.0016112714 0.0004097957 -0.0017846275 -0.0007818312 -0.0008988105 -0.0007834153 -0.0002476360 -0.0004427388 -0.0005142917 -0.0003362908 -0.0002297680 0.0015110869 -0.0025322044 0.0010571607 -0.0025421592 -0.0002707892 -0.0019798907 -0.0006209206 -0.0060885476 0.0001959168 -0.0000144443 0.0023066957 -0.0001266766 0.0011269528 0.0014694294 0.0004504520 -0.0030941430 0.0027520793 -0.0017990770 0.0003190091 0.0039494436 0.0001082586 -0.0111357740 -0.0204042077 0.0125024804 -0.0551231727 -0.0217435970 -0.1055199660 0.0520601128 0.0540389722 0.0541916493 0.0103285541 0.0385377859 -0.0313239780 0.0200216422 -0.0185050487 0.0236367899 -0.1574679017 -0.0418119348 0.0365480403 0.0323703597 0.0902845748 -0.0459673988 0.0375025656 0.0530857703 -0.0717079512 -0.0021356040 -0.0012556022 0.0006764638 0.0040504300 -0.0005414559 -0.0021431139 0.0001726801 0.0003798323 0.0001721859 0.0006424202 -0.0028286673 -0.0010888312 -0.0032478471 0.0018114202 0.0019701776 -0.0045503551 -0.0016751169 -0.0029063009 0.0011639065 0.0029244317 0.0008864962 0.0002686536 0.0002369513 0.0000260477 -0.0008590976 0.0009003797 -0.0001524865 0.0024598895 0.0001001434 0.0011429427 0.0016376615 0.0006677902 0.0004208233 0.0006432849 -0.0011997384 -0.0006722535 -0.0114911229 -0.0047555182 -0.0049593242 0.0062561584 -0.0107770330 -0.0074017602 0.0139116091 0.0215029271 0.0164347465 0.0433027802 -0.1824949286 0.1020551279 -0.0341662511 -0.0127452283 0.0549063222 -0.0081284959 0.0129548612 0.0325902787 -0.0098633826 -0.0042024342 -0.0044677076 -0.0208243626 -0.0144948862 0.0138621353 0.0305436185 0.0293058567 -0.0075746884 0.0049072806 -0.0061220458 -0.0187260054 0.0039950433 -0.0045050839 -0.0069053955 -0.0659201163 -0.1003742114 -0.0467058395 0.0454033069 0.0251293285 -0.0554344766 -0.0288562800 -0.0987641846 -0.0736287001 0.0112877228 0.0056450185 -0.0099574581 -0.0212482302 0.0212650271 0.0024469003 0.1441364312 -0.4699496800 0.3869938128 0.0043307437 0.0057720164 0.0075299635 0.0036933797 0.0089654051 0.0512714584 -0.0074318929 -0.0042517566 -0.0194108802 0.0068211157 -0.0236800268 -0.0151069355 0.0186968144 0.0307640673 -0.0091951878 -0.0293598490 -0.0211536595 0.0031360797 0.0283794046 -0.0159349094 -0.0785792646 -0.1140223534 0.0367499199 -0.1231793907 0.1262252976 -0.0426007069 -0.1057043333 -0.0776908600 -0.0675132626 -0.0731878103 -0.0198087935 0.0337261019 0.0503835232 0.0022271045 0.0060774709 -0.0018584707 0.0189226931 -0.0506934816 0.0107874359 -0.0010035427 0.0006402836 -0.0000845190 0.0185918837 -0.0437975097 0.0013674319 -0.0248419418 0.0232588093 0.0376608302 0.0174762907 0.0289610496 0.0111624468 -0.0080835999 -0.0148182292 -0.0018147267 0.0047467251 0.0056600582 0.0001210638 0.0038592616 0.0045801877 -0.0000074191 0.0037701227 0.0036193872 0.0006841351 -0.0019172763 -0.0093912931 -0.0095066438 -0.0090892376 -0.0082394299 -0.0031935637 -0.0097680698 -0.0083668373 -0.0086094452 -0.0108589808 0.0070891638 -0.0223721468 0.0014714021 -0.0143320032 0.0160043448 0.0003146600 -0.0063821462 0.0055043121 -0.0064900267 -0.0055039221 -0.0027366273 0.0206120602 -0.0009389522 0.0127016013 -0.0190399511 0.0057924988 0.0118442304 0.0058767625 -0.0099050622 -0.0061455328 -0.0034545874 -0.0074663288 -0.0055107026 0.0593092805 0.0057800478 -0.0334484929 0.0597425497 0.0077303339 -0.0417274862 -0.0372094920 0.0311464533 0.0632704293 -0.0014457770 0.0000373382 0.0000390605 0.0008926169 -0.0005747459 0.0006982570 0.0003164580 0.0017666898 -0.0003017715 -0.0012770630 -0.0006082687 0.0004127129 0.0004021381 0.0002456839 -0.0006901678 0.0000653399 -0.0001184402 -0.0000418777 -0.0004627117 0.0073244103 -0.0023156819 0.0079633294 -0.0094074284 0.0032441036 0.0000940357 0.0003468584 0.0000324391 0.0042340738 -0.0003273701 0.0013380544 0.0023702242 -0.0001442418 -0.0022319879 0.0001322902 -0.0001058291 0.0004228819 0.0007367000 -0.0000836256 -0.0002418777 -0.0014251530 0.0005329802 -0.0001166847 0.0006344679 0.0001506435 0.0000534738 -0.0004058361 -0.0006560747 -0.0002992487 0.0023343165 -0.0009140045 -0.0006525191 0.0008013291 -0.0033848698 0.0028488168 0.0003737995 -0.0000355140 0.0002301459 0.0010571869 -0.0050612336 0.0003959607 0.0033168690 0.0026358765 -0.0013887333 0.0002184986 0.0000163751 0.0003119072 0.0000330307 0.0001138310 -0.0006911251 0.0000312217 -0.0000733477 -0.0006659497 0.0000411845 0.0000679652 0.0004567124 0.0014055646 -0.0010503750 -0.0010025905 0.0030634947 -0.0026598614 -0.0020256191 0.0021029076 0.0048984406 -0.0006596023 -0.0015610027 0.0046787585 0.0011507632 0.0112524338 0.0030517684 -0.0057312413 0.0024896211 0.0102985660 -0.0001903484 0.0010940064 -0.0016733168 -0.0005528256 -0.0052788369 -0.0048192840 0.0024759758 0.0050632002 -0.0031138709 -0.0063042357 -0.0024073675 -0.0156798723 0.0012854394 0.0039283633 0.0016201715 0.0021984330 0.0020870808 0.0010348340 0.0011594976 0.0020808958 0.0009724257 0.0004539070 -0.0040692063 0.0076353568 -0.0024502573 0.0069284887 0.0009153482 0.0097193360 0.0045981088 0.0195356465 -0.0017748189 0.0004389605 -0.0064981573 0.0006321630 -0.0035762681 -0.0046284427 -0.0015719024 0.0117501204 -0.0080486052 0.0063821605 -0.0015578661 -0.0120568137 0.0001654694 0.0259379845 0.0461654962 -0.0290111273 0.1241187912 0.0523418905 0.2393665833 -0.1139964837 -0.1141041097 -0.1170482571 -0.0272077687 -0.0879388785 0.0652702880 -0.0417297479 0.0379442039 -0.0538759240 0.3703349488 0.1171084727 -0.0601442583 -0.0801521763 -0.1975893193 0.1025846704 -0.0780959216 -0.1133003088 0.1484981623 0.0102143974 0.0191401922 -0.0013466627 -0.1112070470 0.0220799655 0.0501168056 -0.0140450858 0.0012859555 0.0075241705 -0.0388890250 0.0185434382 0.0287461963 -0.0174492459 0.0010258241 0.0053047119 0.0039156130 -0.0041852000 0.0058885004 -0.0110058152 -0.0206225219 -0.0210995450 -0.0094721451 0.0027579253 -0.0046238909 -0.0068605297 0.0027038594 -0.0036344009 -0.0338007938 0.0061887140 -0.0139089858 0.0080307521 0.0034275059 -0.0023632091 0.0288071239 -0.0219952170 -0.0069788736 -0.0030600510 0.0003482859 -0.0000594950 -0.0028217270 0.0042322030 0.0008061341 -0.0015414316 -0.0021303991 -0.0025546640 -0.0037928049 0.0148404373 -0.0100907827 0.0033778595 0.0003888583 -0.0060070584 0.0007543391 -0.0017043322 -0.0039790934 0.0006377423 0.0006479245 0.0005515934 0.0029924270 0.0020343410 -0.0018775766 -0.0038423413 -0.0035333392 0.0013280410 -0.0002574981 0.0007869849 0.0020037895 -0.0006887754 0.0003376179 0.0010566346 0.0084039803 0.0141430471 0.0058808884 -0.0069973271 -0.0020966022 0.0092948957 0.0028046978 0.0105742529 0.0074250477 -0.0004710750 -0.0007720455 0.0007516996 0.0012323487 -0.0009618546 -0.0004703182 -0.0063961723 0.0225990445 -0.0195805699 0.0000911996 -0.0004168928 -0.0004110574 -0.0002228937 0.0000894106 -0.0006235492 -0.0006468102 -0.0008482910 0.0002052184 0.0004979610 0.0023692858 -0.0006808634 -0.0003502456 -0.0017277540 0.0005911190 0.0010903115 0.0009478048 0.0000635955 -0.0026177544 0.0004111793 0.0020857564 0.0084874398 -0.0076009741 0.0031955797 -0.0081396800 0.0043183007 0.0068740186 0.0033404826 0.0026566903 0.0035229760 0.0021224762 -0.0009882508 -0.0005155982 0.0002432830 -0.0002399403 0.0005680821 -0.0040922460 0.0059172666 -0.0018239896 -0.0056332658 0.0053903646 -0.0029252559 -0.0010699925 0.0025951017 -0.0002637826 0.0012987195 -0.0011496522 -0.0018168115 -0.0008714604 -0.0013829014 -0.0005504120 0.0004328134 0.0006485629 0.0001547994 -0.0002817212 -0.0002319283 0.0000607465 0.0001243472 -0.0003595587 -0.0000783450 -0.0002930536 -0.0001390840 -0.0001044250 0.0002796987 0.0003407720 0.0001884627 0.0002668571 0.0005311625 0.0004381413 0.0004842011 0.0005427462 0.0004692498 0.0007235369 -0.0002835394 0.0005538884 0.0000081110 0.0007091600 -0.0009984994 0.0004429167 0.0006500199 -0.0000711626 -0.0014508334 0.0005039559 0.0001181870 -0.0014314246 0.0001267013 -0.0006752151 0.0009632996 -0.0003390426 -0.0003858375 -0.0006045948 0.0006430920 0.0007441399 0.0005245838 0.0001950251 0.0000966458 -0.0030715123 -0.0001920146 0.0017790705 -0.0030756939 -0.0003747457 0.0022824902 0.0017513930 -0.0015190515 -0.0030619719 0.0161606800 0.0028657773 -0.0019460674 -0.0002332995 -0.0030715960 -0.0092690911 -0.0058977283 -0.0039795945 -0.0003820469 -0.0007543105 0.0001409337 0.0004823197 -0.0040454013 -0.0005657253 0.0030826035 0.0017096947 0.0048770386 0.0053430282 -0.0149981396 -0.0272745284 -0.0091063174 -0.0271473436 0.0032613480 0.0111450320 0.0005615007 -0.0000953541 -0.0000845823 -0.0214095985 -0.0075650946 -0.0020703306 -0.0118670313 0.0008992956 0.0227253332 -0.0009294540 -0.0013988961 -0.0022931335 0.0023800824 -0.0019969246 -0.0009137204 -0.0000490185 -0.0000699588 -0.0001589376 0.0029642784 -0.0008099600 0.0023834124 -0.0007086952 0.0015539934 0.0037184118 0.0081767947 -0.0057669654 -0.0070377115 0.0082752434 -0.0049709829 0.0047578176 -0.0000739615 0.0000521814 -0.0000419285 0.0116844220 -0.0099031076 -0.0009968560 0.0089622464 0.0019700988 0.0091605871 0.0002653905 0.0000692182 -0.0002391511 0.0002290842 0.0000461507 -0.0000585251 -0.0001008856 0.0000614693 -0.0000251429 -0.0001538238 0.0001256040 0.0000576453 0.0125276539 -0.0233296787 -0.0102298991 -0.0032691804 0.0468396563 0.0025742507 0.0535828560 0.0357456017 -0.0285074327 -0.0466562589 0.1449094026 0.0403101644 0.3843194506 -0.0377925061 -0.2012601105 0.0871334354 0.3415277398 -0.0357676119 0.0390179208 -0.0738460994 -0.0118627830 -0.0817928367 -0.1104757198 0.0247165199 0.2388003180 -0.1347783337 -0.3147493659 0.0179158551 -0.3931853335 0.0346175018 -0.0035490770 -0.0298416453 0.0107542619 0.0156284086 0.0045202942 0.0075724327 0.0384604013 0.0467477979 -0.0016647572 -0.0302961666 0.0820933547 -0.0098685692 0.1030518879 0.0466796074 0.2144585135 0.0916851051 0.2147838542 -0.0438366351 0.0234794074 -0.0259098494 0.0163354943 -0.0556064910 -0.0782379964 -0.0271889275 0.2267825133 -0.0493039624 0.1146271512 -0.0125015305 -0.2378121786 0.0271070764 -0.0012140476 -0.0026264769 0.0016216221 -0.0068507193 -0.0024159377 -0.0128109714 0.0064128941 0.0068159507 0.0071476826 0.0010174627 0.0045910200 -0.0042800833 0.0022293868 -0.0020436966 0.0028666114 -0.0184795699 -0.0061404143 0.0030836673 0.0032867716 0.0108632478 -0.0051289085 0.0034711013 0.0056377971 -0.0083955911 0.0266571274 0.0286502223 -0.0079747090 -0.1125938236 0.0254828300 0.0564657192 -0.0052565372 0.0017047196 0.0029278417 -0.0539142891 -0.0123378011 0.0076581912 -0.0362613191 -0.0034591581 0.0197508320 0.0362136196 -0.0165826947 0.0186942717 0.0636673076 -0.0218187405 0.0219805142 0.0124738643 -0.0010373526 0.0063800132 -0.0160877539 0.0408751052 -0.0059494695 0.1596985959 -0.0183487669 0.0756983110 -0.0514515195 -0.0166757546 -0.0181733609 0.0326357476 -0.0236536492 -0.0159442721 0.0012876581 0.0008283184 0.0007251101 -0.0009057114 0.0018593719 -0.0037188802 0.0036671272 0.0034751630 -0.0023013504 0.0030609470 -0.0065793880 0.0021261513 -0.0027030575 -0.0017677073 0.0036711177 -0.0005204334 0.0006567830 0.0017801170 -0.0002766000 -0.0005768351 0.0001584565 -0.0009395406 -0.0009277976 0.0002134737 0.0018771630 0.0014909483 -0.0002572072 0.0000371538 -0.0000504655 -0.0014400958 0.0002078516 0.0002657432 -0.0001124798 -0.0035667383 -0.0065605708 -0.0035662063 0.0015314158 0.0022503720 -0.0036980580 0.0020198382 -0.0076989130 -0.0022078781 -0.0000706889 0.0001430473 -0.0003651423 -0.0008884874 0.0006374925 -0.0001504118 0.0027979786 -0.0109228021 0.0092165913 -0.0000032833 0.0001449376 0.0006348357 -0.0000154399 -0.0003461703 -0.0001945323 -0.0001330738 0.0002199548 0.0002605260 0.0005956087 -0.0007690634 0.0000461459 -0.0008539846 0.0003207188 -0.0000835568 0.0006423503 0.0003366267 -0.0005517071 -0.0004653059 -0.0002690137 0.0018902721 -0.0045531274 0.0036030147 -0.0034010799 0.0012082245 -0.0038800096 0.0027393536 0.0010680886 0.0001563138 -0.0002709944 -0.0020380311 0.0004042143 -0.0004002215 -0.0001275797 -0.0001892284 0.0000635629 0.0008783579 0.0033373948 -0.0007877782 -0.0346205910 0.0209657549 -0.0060944575 0.0002358429 -0.0013682205 0.0001656434 -0.0012267745 0.0002277271 0.0010211071 0.0003988855 0.0006133440 0.0002466408 -0.0000717545 -0.0001590277 0.0000485222 0.0000199461 0.0000286711 -0.0000532056 0.0002593869 -0.0000798777 -0.0000575401 -0.0000287982 -0.0000065435 -0.0000741436 -0.0007276694 0.0003398027 0.0009007011 0.0007234258 -0.0006505240 -0.0012717622 -0.0000997661 -0.0001680041 -0.0000710375 -0.0001152700 0.0000539255 -0.0002503496 0.0000060396 0.0000240825 -0.0000268840 0.0000809389 -0.0003634730 0.0002219483 -0.0009822626 -0.0001510246 -0.0000948774 -0.0013217808 0.0004801426 0.0000131881 0.0000435894 -0.0000434609 0.0000026902 -0.0001377746 0.0000521989 0.0001939325 0.0000688396 -0.0000002081 -0.0000527629 0.0018534652 -0.0003299598 -0.0014520703 0.0017970127 -0.0001466161 -0.0018217111 -0.0000516166 0.0004062726 0.0005501888 0.0356551417 0.0100276374 -0.0091833115 0.0005236881 -0.0072063422 -0.0164822369 -0.0136774256 -0.0082171288 -0.0020144008 -0.0013514138 -0.0001051033 0.0004699571 -0.0110606464 -0.0003198307 0.0093064373 0.0045705752 0.0099505610 0.0132738304 -0.0392698727 -0.0457026469 -0.0239596482 -0.0514927027 -0.0009616570 0.0233245896 0.0010945080 0.0000167548 -0.0002926093 -0.0543530428 -0.0219885622 -0.0019697928 -0.0295386352 0.0089207199 0.0479355937 -0.0036332597 -0.0049503668 -0.0178040599 0.0129245047 -0.0122318376 -0.0045973613 0.0000682608 0.0002529429 0.0006829652 0.0108959254 -0.0036673825 0.0088300800 -0.0015361157 0.0081261596 0.0136170408 0.0209277553 -0.0461859103 -0.0293527732 0.0628582333 -0.0255258474 0.0333516797 -0.0005685561 0.0001380677 -0.0000580426 0.0445262798 -0.0334664194 -0.0047117558 0.0398038369 -0.0040355621 0.0500249822 0.0005227055 0.0000999607 -0.0007116457 0.0007695433 0.0002693873 0.0003023998 -0.0006474668 0.0004005277 -0.0001092873 -0.0004801675 0.0002035365 -0.0004481461 -0.0020610492 -0.0197598998 -0.0028056354 -0.0145987521 0.0216567341 0.0193186583 0.0323480233 0.0301889285 -0.0159816645 -0.0246680551 0.0665649698 0.0200411168 0.2112338961 -0.0091786329 -0.1096802592 0.0252167477 0.1430030672 -0.0084083098 0.0301307986 -0.0182958455 -0.0131224504 -0.0401760406 -0.0576133839 0.0128763022 0.1803400668 -0.0581867863 -0.1645299210 0.0154730062 -0.2315796559 0.0046509001 0.0271610714 0.0362034371 0.0186714020 -0.0139992606 -0.0248364777 -0.0086344345 -0.0625331506 -0.0355759731 -0.0144209653 0.0394804621 -0.1269888284 0.0174834317 -0.2727484328 -0.0204449617 -0.3202598292 -0.1632819666 -0.3807158209 0.0264119301 -0.0387806862 0.0603190494 -0.0268507660 0.0845956691 0.1093077340 0.0402934373 -0.3724130975 0.0993077444 -0.1922608453 0.0322931566 0.3067294990 -0.0223248686 0.0009178621 0.0013970099 -0.0008811069 0.0037761438 0.0018408600 0.0075364248 -0.0038177910 -0.0033937592 -0.0032467848 -0.0011089573 -0.0028825072 0.0017092424 -0.0005813740 0.0007219376 -0.0016325781 0.0078354233 0.0033568583 -0.0007736725 -0.0026640684 -0.0047036842 0.0026160165 0.0000790707 -0.0014830431 0.0034773002 0.0005756773 0.0005540240 -0.0002172816 -0.0031771004 0.0004784323 0.0008876905 -0.0003891640 -0.0001544803 0.0001754672 -0.0006220067 0.0017163795 0.0009073447 0.0012997418 -0.0008041117 -0.0008342500 0.0014620879 0.0004154734 0.0009886717 -0.0010536549 -0.0016288371 -0.0009166089 -0.0004886628 0.0001082519 -0.0002239948 0.0000431644 -0.0002826446 -0.0000338722 -0.0026094668 0.0003393571 -0.0011030839 0.0001081455 0.0000524578 -0.0002945244 0.0001109167 0.0003414180 0.0003518749 0.0038954821 0.0014749265 0.0018914963 -0.0023831009 0.0042223001 0.0029054382 -0.0051325403 -0.0076914368 -0.0070812475 -0.0040559339 0.0656195542 -0.0157073794 -0.1288801383 -0.0193552593 0.1992503661 -0.0254637763 0.0546191379 0.1292302572 -0.0129567134 -0.0122664524 0.0038240057 -0.0869319010 -0.0716739123 0.0416518792 0.1207916896 0.0997762091 -0.0498583694 0.0038149927 -0.0281873942 -0.0709348783 0.0178882294 -0.0040399659 -0.0289908567 -0.2986086015 -0.5051538213 -0.2530333034 0.2128354241 0.0633654981 -0.3436659930 -0.0579336431 -0.3653506660 -0.2203020196 0.0018910736 0.0134590637 0.0189782211 -0.0006448418 0.0009908970 0.0005646650 -0.0172233607 0.1092638275 -0.1459925329 -0.0010789946 -0.0065435025 0.0007729556 -0.0024042413 -0.0016307223 -0.0033928291 0.0043706334 0.0040177361 0.0019441533 -0.0006930676 0.0068350997 -0.0011976439 0.0025879104 -0.0020608086 0.0019445960 0.0025038203 0.0017338114 -0.0001664161 0.0093702915 -0.0002086270 0.0015498110 0.0264157305 -0.0239289869 0.0121832531 -0.0150898150 0.0141338221 0.0122463166 0.0014573453 0.0016178922 -0.0021465342 -0.0061103667 -0.0098674826 -0.0015123982 0.0025127996 0.0070681185 0.0061660211 -0.0445985263 -0.0086885621 0.0291057501 0.0002226667 -0.0000574279 -0.0001098604 -0.0071729686 0.0226138745 -0.0058911066 0.0140315639 -0.0072760532 -0.0152003296 -0.0058073310 -0.0083828894 -0.0026164172 0.0025209009 0.0047543952 0.0004122016 -0.0015647747 -0.0018781247 0.0001053523 -0.0012811510 -0.0016384326 0.0001561527 -0.0012119598 -0.0012592857 -0.0001181216 0.0042455077 -0.0008449141 -0.0037698905 -0.0024280107 0.0061400647 0.0087197724 0.0033816350 0.0028889570 0.0029879532 0.0036772004 -0.0023454432 0.0070681016 -0.0005454509 0.0045246818 -0.0049366596 0.0001063732 0.0022913805 -0.0016973816 0.0031995363 0.0015087849 0.0010091544 -0.0069790639 0.0002453038 -0.0047907459 0.0061703381 -0.0018679484 -0.0041564441 -0.0016396250 0.0032451586 0.0014606562 0.0010492994 0.0025140308 0.0019774374 -0.0259693023 0.0008356581 0.0171154080 -0.0255552923 -0.0009341714 0.0213606103 0.0087803658 -0.0094554713 -0.0173159652 0.0005424777 0.0000457563 0.0002947446 -0.0000062542 0.0002732511 0.0009612024 -0.0009683712 -0.0002171698 -0.0008917992 0.0017989318 0.0004155751 -0.0003154742 -0.0000930231 0.0001645802 0.0005038527 -0.0005284766 -0.0008381178 -0.0011600849 0.0042395650 0.0043218877 0.0014884938 -0.0037165456 -0.0059397290 0.0071641035 -0.0002946153 -0.0000174629 -0.0003562581 -0.0001357707 -0.0003345186 0.0006064204 -0.0008702203 -0.0005088053 -0.0012704193 -0.0000256297 -0.0000227856 -0.0001551412 -0.0001899581 0.0000293749 0.0001398511 0.0004016505 -0.0001449019 -0.0000008174 -0.0000700780 -0.0000554369 0.0000063609 -0.0000230873 0.0002280756 0.0002944737 -0.0003375336 0.0001001294 0.0000000726 -0.0000968136 0.0010614748 -0.0007633174 -0.0001057331 0.0000134565 -0.0000776776 0.0007918099 0.0002687411 -0.0004769398 -0.0009028451 0.0002656826 -0.0002027179 -0.0002443975 -0.0001457824 -0.0000705683 -0.0000704895 0.0001595464 0.0007329732 -0.0000061539 0.0000127541 0.0001986343 -0.0000136521 -0.0000257759 -0.0001208817 -0.0001678868 0.0000941677 0.0001394731 -0.0010106523 0.0021792471 0.0006350435 0.0003750234 -0.0012533521 -0.0003648121 -0.0004617662 0.0016465521 0.0004504780 0.0041883202 -0.0021977254 -0.0024958015 0.0017129715 0.0046336606 -0.0008103059 0.0002867542 -0.0013816200 -0.0000721165 0.0000605874 -0.0006639141 -0.0002801216 0.0033900115 -0.0022508368 -0.0043237290 0.0009248968 -0.0022838698 0.0003472198 -0.0015251012 -0.0019509371 -0.0005255600 -0.0001036907 -0.0001577625 -0.0000714834 0.0010394341 0.0017071012 -0.0000535809 -0.0000345034 0.0011645119 0.0002475697 0.0036916231 0.0015637830 0.0061574136 0.0022118336 0.0031163490 -0.0010310481 0.0009306498 0.0009621026 0.0005196478 -0.0013246906 -0.0019818591 -0.0006713027 0.0063060082 0.0004306568 0.0031196133 0.0001264517 -0.0069324050 0.0010856591 -0.0077472831 -0.0240257035 0.0126731866 -0.0580155640 -0.0107615519 -0.0958360702 0.0548418061 0.0652720017 0.0697026450 0.0035831972 0.0354346483 -0.0449897175 0.0127796410 -0.0133999504 0.0232124954 -0.1370721085 -0.0478540036 0.0200203729 0.0366552334 0.0740554654 -0.0404936842 0.0134608587 0.0321198637 -0.0554317769 0.0002292650 0.0002028668 -0.0000366735 -0.0008992922 0.0005220483 0.0007130175 0.0000697169 0.0003132683 -0.0000079458 -0.0004807456 -0.0011467034 -0.0001951487 -0.0013351810 0.0002767100 0.0006803417 -0.0008498771 -0.0005074729 -0.0006563249 0.0010776709 0.0006370767 0.0005059504 0.0002512404 -0.0001134139 0.0000403457 -0.0004715333 0.0007506257 -0.0001205352 0.0030763935 -0.0004409822 0.0016834029 0.0005593933 0.0001214957 -0.0003805487 0.0011660692 -0.0013954755 -0.0001008662 -0.0053088262 -0.0026216066 -0.0028686266 0.0020731546 -0.0027110508 -0.0012172219 0.0068142683 0.0088855677 0.0072083816 0.0010322857 0.0015499025 0.0052703507 0.0110120212 0.0045364284 -0.0113206655 0.0011353059 -0.0023001644 -0.0058467279 0.0000046133 0.0015300268 -0.0025512752 0.0029493440 0.0027130266 0.0016318594 -0.0048089962 -0.0045976307 0.0005562955 -0.0015731978 0.0010548779 0.0059262939 -0.0009167028 0.0008969862 -0.0018494338 0.0087215140 0.0263698908 0.0131307544 -0.0050485002 -0.0058098326 0.0060567888 0.0013634454 0.0192060546 0.0137186388 0.0043600674 0.0033825048 -0.0010736548 -0.0053559495 -0.0098808416 0.0049158393 -0.0143991435 -0.0060021627 0.0238746722 -0.0020496366 0.0017713710 0.0018168351 0.0008307346 0.0008652459 0.0040595401 -0.0017580996 -0.0025442859 -0.0041856691 0.0037526914 -0.0004514170 0.0000918064 -0.0012453610 0.0005489652 -0.0029167257 0.0000965897 -0.0004242597 0.0006481215 0.0088811416 -0.0047995821 -0.0209071728 -0.0032900701 0.0224910463 0.0065125255 0.0071793068 -0.0072199604 -0.0073686787 -0.0019218377 0.0060875979 0.0030959132 0.0040467101 0.0072193297 0.0027692913 -0.0004746548 0.0009878136 -0.0001322965 0.0375666037 -0.0370588321 -0.0009875079 -0.0006394081 0.0002804326 -0.0000123439 0.0592198894 -0.0085173997 0.0233457172 0.1133391584 0.0236790402 -0.0765511594 -0.0119562107 -0.0233836066 -0.0037261383 -0.0009433516 0.0055816394 0.0026866951 0.0009662478 -0.0002732228 -0.0017881845 -0.0003315412 -0.0018385767 -0.0018658995 0.0009990911 0.0005762651 -0.0010728377 0.1117170562 -0.0784185636 -0.1635691949 -0.1372135644 0.0771188359 0.1859307190 -0.0016837138 0.0033728944 -0.0068411904 -0.0057809379 -0.0003206123 0.0128619824 -0.0000209564 0.0011250484 -0.0003522834 0.0064480836 0.0025475385 0.0051831118 0.0002401542 0.0027294748 -0.0002302729 -0.0025329397 -0.0008599709 -0.0000294533 -0.0043168847 0.0007877103 0.0027350912 0.0030537677 -0.0001549670 -0.0052137093 0.0090513157 -0.0025323363 -0.0027373857 -0.1246091395 0.0668020035 0.1325001160 -0.1114517724 0.0463167172 0.1644749387 -0.0957928414 0.0228044539 0.0925533551 0.0004250270 0.0001153375 -0.0003580439 0.0001613306 -0.0002898834 0.0000576967 -0.0001715829 0.0003897510 -0.0001913499 -0.0001798010 -0.0001919138 -0.0000358132 -0.0001694717 0.0000955431 0.0002715654 0.0001224668 0.0002399839 0.0002723052 -0.0026544461 0.0003530383 -0.0013804098 0.0024735295 -0.0031007758 0.0006256157 -0.0000357572 -0.0000067710 -0.0001381506 -0.0010806741 -0.0009084144 0.0002425758 0.0006348365 0.0000613531 0.0000590914 0.0001358278 0.0000397070 0.0000681398 0.0002493916 -0.0003069283 -0.0002176793 -0.0005061768 0.0003583256 -0.0000808043 0.0003939538 0.0002343480 0.0002446046 -0.0000743715 -0.0001371059 -0.0000914622 0.0007122682 -0.0010904054 -0.0001504928 0.0006516705 -0.0007952272 0.0004169870 0.0002213767 -0.0001522668 -0.0001386166 0.0003347011 -0.0026917572 0.0005985634 0.0009139996 0.0010089371 -0.0005918063 0.0000349328 0.0000353071 0.0001721297 0.0000414028 0.0000602280 -0.0001520943 0.0000235401 0.0000247687 0.0002079815 0.0000176819 -0.0000167468 -0.0000982230 0.0000291223 -0.0004205664 -0.0000689752 0.0001588518 -0.0007654869 -0.0000385926 0.0002637246 0.0010487924 -0.0000490872 -0.0000873871 0.0000325233 0.0000186660 0.0007421542 0.0009819310 -0.0002514470 -0.0006425404 -0.0006692918 0.0003951643 0.0002566595 0.0005780013 -0.0001843902 -0.0004977034 -0.0004190224 0.0002923228 0.0008115713 0.0004800550 0.0002302860 -0.0001617529 -0.0023236322 -0.0003835247 0.0012522948 0.0011491110 0.0006319092 0.0001820584 -0.0000480191 0.0001371090 -0.0005431878 -0.0006525218 -0.0000403931 -0.0001843090 -0.0004386037 -0.0002434093 -0.0027120087 -0.0004614660 -0.0035264764 -0.0014149203 -0.0015728885 0.0003272572 -0.0005196446 -0.0005682297 -0.0003144646 0.0006228420 0.0008996105 0.0003236261 -0.0034784822 -0.0002734487 -0.0015131017 0.0000536281 0.0029495032 -0.0004497145 -0.0992445158 -0.0000900454 0.0160150200 -0.0472016450 -0.2232077267 -0.2837906353 0.1214925704 -0.0640562845 -0.1592234653 0.1992528035 0.1504322389 0.2290714968 -0.0740469942 0.0712918503 0.0687091885 0.1903285545 -0.1190643643 -0.1673492757 0.3371602933 -0.0511661449 -0.0912447575 -0.4066517316 -0.2716820156 0.0794245217 0.0488140294 0.0340785499 -0.0150849236 -0.1959049971 0.1090873624 0.1101984420 0.0190487916 0.0580105558 -0.0019180555 -0.0589350904 -0.1294072274 0.0213125876 -0.0904267739 -0.0566095130 0.0263657339 -0.0673327635 0.0846358079 -0.0241530788 -0.0134645251 0.1421450664 -0.0213191148 0.0001598804 -0.0615481530 -0.0000728070 0.0362648995 -0.0490909260 0.0144232295 -0.2241774174 -0.0389642119 -0.1132680897 0.0544856222 0.0128785937 0.0076324712 0.0465674835 -0.0281223799 -0.0060048938 -0.0469684600 -0.0084047748 -0.0115655501 0.0190747526 -0.0315067730 -0.0225144436 0.0410066326 0.0504167160 0.0460341065 -0.0172205171 0.0346531307 -0.0208396976 -0.0072486944 -0.0042747626 0.0065318402 -0.0012627780 0.0006167769 0.0028598576 -0.0017118160 0.0007617864 0.0014275574 0.0020301670 0.0007055090 -0.0018334149 -0.0007964750 -0.0005389334 0.0006185496 0.0027846679 -0.0003444257 -0.0039801883 -0.0049495792 -0.0055630167 0.0011997389 0.0028407748 0.0074748320 0.0010297078 -0.0033045629 0.0013979379 0.0075616216 -0.0017684395 -0.0048429077 -0.0090287547 0.0013670257 -0.0036358553 0.0028052028 -0.0009889766 0.0022845949 -0.0021581423 0.0085934678 -0.0128769087 -0.0012404208 0.0041885453 -0.0008174439 -0.0047978225 0.0047644124 0.0038906445 0.0006716389 -0.0040938363 -0.0046892980 -0.0066700833 -0.0018105161 0.0032243905 0.0038386807 -0.0009402015 -0.0033331568 -0.0009856217 -0.0044281052 -0.0014684231 0.0055651568 0.0035191272 -0.0035477554 -0.0266362425 0.0214610724 -0.0046039858 0.0293800080 -0.0086772919 0.0069230540 -0.0031784705 0.0015003552 0.0059073528 0.0178626761 0.0406794925 0.0241903551 -0.0049528744 0.0038388615 0.0034625412 -0.0004405673 -0.0225839880 0.0024822384 -0.0069793163 0.0753026315 -0.0596826169 0.0302496542 -0.0086782167 0.0160668021 -0.0088613032 0.0009560848 -0.0017755850 0.0004438864 -0.0013149262 -0.0010724979 -0.0010324160 0.0006555183 -0.0003927354 -0.0000120079 -0.0005060397 0.0002660038 0.0005424209 -0.0003492654 0.0002478713 0.0000034257 -0.0003112097 0.0003311560 -0.0002204044 0.0019223156 0.0000942732 -0.0014520827 -0.0000108436 0.0016204846 0.0019476100 0.0008253261 0.0011252694 0.0012917177 0.0018836405 0.0003859713 -0.0045455912 0.0002893559 -0.0004869449 -0.0008054702 -0.0003508632 0.0031140983 -0.0016576667 -0.0042048541 0.0003527125 -0.0001449062 0.0046720012 -0.0015385727 -0.0014324644 -0.0009529914 0.0000829290 0.0015844603 -0.0011877967 0.0004475046 0.0018988295 0.0003747536 0.0000712882 -0.0002626092 -0.0051616426 0.0000504159 0.0020293127 -0.0046879305 -0.0012325791 0.0041648739 0.0037059472 -0.0031262882 -0.0061018212 0.0866602507 0.0332831787 -0.0379402234 0.0048988671 -0.0102959415 -0.0157447785 -0.0290572783 -0.0192575785 -0.0115115488 -0.0043499553 -0.0023445625 -0.0016523202 -0.0312308802 0.0038503328 0.0339381008 0.0158325116 0.0161611558 0.0226840407 -0.1088961311 -0.0677627012 -0.0514269733 -0.0686566611 -0.0120918636 0.0129377786 0.0026984370 0.0013221763 -0.0005305165 -0.1511590675 -0.0562341755 0.0035470257 -0.0459478832 0.0289405543 0.0732604966 0.0091728154 0.0062091378 0.0167084548 -0.0249528904 0.0252856218 0.0149304935 -0.0008079727 0.0013344086 0.0016287546 -0.0304554122 0.0071629802 -0.0314034341 0.0103431359 -0.0143529731 -0.0231870362 -0.0742853987 0.0761369176 0.0578453004 -0.0853818573 0.0435868866 -0.0310740207 0.0014819641 -0.0011028212 0.0003957650 -0.1282188320 0.0884260650 0.0081461065 -0.0670281756 -0.0077542196 -0.0776839117 0.0010237646 0.0000310297 -0.0007946310 0.0020221250 0.0003527162 0.0008867364 0.0010464539 -0.0006762555 -0.0006620290 0.0014339922 -0.0005261375 0.0004948294 -0.0014296186 -0.0750301649 -0.0096503191 0.0098981705 -0.1253346632 -0.0149000424 0.0323062302 0.1430203886 -0.0016390721 -0.0059823930 -0.0365836839 -0.0029489726 0.0792166177 0.1405553883 -0.0338734011 -0.1892358125 -0.2643439272 0.0908413275 0.0247346546 0.1036672487 -0.0070701934 -0.0381317727 -0.0392572611 0.0201328739 -0.0433997979 0.1247364330 0.0674931797 0.0202839999 -0.2830240406 -0.0445603112 0.0471980640 0.1150258762 0.0164255657 0.0219302242 0.0713839417 0.0108564841 -0.0103210791 -0.1060444452 0.0062100936 -0.0228587489 0.0469285516 -0.0190127810 -0.0642794246 -0.1042926281 -0.0733716168 0.1021723338 0.2496646840 0.0523455525 -0.0148692978 -0.1436102247 -0.0020270343 0.0063513040 0.0373990214 0.0039494218 0.0284180962 -0.1564879716 0.0270754767 -0.0964395650 0.3162621960 -0.0831788370 0.0026033604 -0.0125401407 0.0068913614 -0.0264122146 0.0094095475 -0.0299174492 0.0255215746 0.0391980426 0.0466274867 -0.0088317119 0.0111966590 -0.0370769393 0.0085635784 -0.0095098137 0.0080958061 -0.0651008476 -0.0169562895 0.0157422155 -0.0030893711 0.0394837866 -0.0135503200 0.0180479793 0.0234667925 -0.0332665533 0.0032411149 0.0021189009 -0.0012438230 -0.0121613145 0.0055451800 0.0069409906 0.0012201539 0.0024072148 -0.0003887053 -0.0033624648 -0.0059106316 0.0014500301 -0.0035187566 -0.0031003956 0.0009245622 -0.0018629043 0.0054606003 -0.0001141766 -0.0013699500 0.0067437358 -0.0014048811 -0.0000596313 -0.0033284197 0.0000279056 0.0022802277 -0.0030799606 0.0009150830 -0.0147220541 -0.0018527465 -0.0073764977 -0.0002645125 -0.0002337488 0.0016475881 0.0005149079 0.0006095377 -0.0007149459 0.0097911451 0.0064893061 0.0051540419 -0.0033293115 0.0038058932 0.0039047099 -0.0151424753 -0.0189166189 -0.0154451826 0.0283324561 0.0181453767 -0.0583182674 0.0382570307 0.0292299825 -0.0278454217 0.0039178380 -0.0009232453 -0.0075009888 0.0078547527 -0.0080983923 -0.0179228360 -0.0105923215 -0.0020038489 0.0149620311 0.0035039759 0.0031647665 -0.0023774566 -0.0062044617 0.0012172119 0.0133141384 0.0047255056 0.0012162944 -0.0090019245 -0.0099206860 -0.0022564662 0.0166052272 0.0153289413 -0.0053251780 -0.0256690252 0.0070334166 0.0456366509 0.0363602692 0.0149451418 -0.0015101954 -0.0046979960 -0.0057236022 0.0051636360 0.0109995401 -0.0161321666 0.0711138380 -0.0790416480 -0.0443607045 -0.0144090304 0.0387722427 -0.0657830492 -0.0419058321 0.0194122961 0.0372219667 0.0446479718 0.0873369262 0.0398231691 -0.0018666050 -0.0977093487 0.0352894215 0.0351836639 0.0302097395 0.0540940686 0.0213115750 -0.0686301343 -0.1050202588 0.0436101547 0.4096661804 -0.1499585899 -0.1777961177 -0.4402255002 -0.0363153987 0.0184590370 0.2374024277 -0.0442701755 -0.1028076850 -0.2680848838 -0.4927370552 -0.3097372188 0.0937942747 -0.0027555894 -0.0032044612 0.0022569846 -0.0098770411 0.0043889485 0.0040662264 0.0045367291 -0.0034593431 0.0015177166 0.0067458564 -0.0083336153 0.0061210868 -0.0007323692 0.0022390608 0.0017091310 0.0008565402 -0.0001136658 -0.0002490208 -0.0008766444 -0.0006333672 -0.0005393508 0.0005288079 0.0003706818 0.0001796897 0.0002508256 0.0007059364 0.0002973194 0.0005565416 0.0002702919 0.0003584043 -0.0000362418 -0.0003632059 -0.0005973172 -0.0015748298 -0.0010682626 0.0000749286 -0.0009481465 -0.0008567962 -0.0007075314 -0.0008359859 0.0004592853 -0.0012773960 0.0002045171 -0.0015193601 0.0018368639 0.0002823134 -0.0030409601 0.0038152511 0.0062068910 -0.0048076745 -0.0014221242 -0.0023064238 0.0014880419 -0.0000663915 -0.0021537904 0.0007404358 0.0008289100 0.0015950823 -0.0009731722 -0.0023475623 -0.0005407841 -0.0002903437 -0.0000250987 0.0057869645 0.0009276962 -0.0000534469 0.0037310863 0.0047952626 -0.0021161550 -0.0052882200 0.0039477666 0.0066489719 0.0045060474 0.0017428375 -0.0011266133 0.0003693391 -0.0008941266 -0.0023447718 -0.0018927612 -0.0013369202 -0.0008936718 -0.0010849338 -0.0001404948 0.0002210651 -0.0010233642 0.0005504036 0.0012461027 -0.0000066561 0.0011672076 0.0019450979 -0.0047130046 -0.0059457922 -0.0032953940 -0.0048403300 -0.0016691702 0.0016671613 0.0003420808 -0.0004489866 -0.0011952490 0.0049993320 0.0024579781 0.0033754888 -0.0103405085 0.0005733525 0.0119594219 0.0005256608 0.0002458677 0.0009398347 -0.0016501619 0.0016780554 0.0011135877 0.0003390704 -0.0001865624 0.0001164484 -0.0016503222 0.0002980801 -0.0018700173 0.0003731578 -0.0005762068 -0.0010518494 -0.0037741999 0.0047722398 0.0030119680 -0.0057775952 0.0035570224 -0.0026523724 -0.0000326915 0.0000569680 0.0000491109 -0.0057075965 0.0036238617 -0.0002690257 -0.0058427627 0.0003953259 -0.0056701356 0.0000930196 -0.0001618223 0.0010127932 0.0002976512 0.0001429700 -0.0001310247 0.0000382666 -0.0000440258 -0.0001272384 0.0000630075 -0.0000391783 0.0001030568 0.0002041320 -0.0041327586 -0.0006139892 0.0001703576 -0.0061810168 -0.0006045725 0.0015586241 0.0072262704 -0.0000972507 -0.0003734284 -0.0020265262 -0.0001116884 0.0035598724 0.0072448618 -0.0011360007 -0.0109761312 -0.0151776614 0.0051687595 0.0010748761 0.0055389791 -0.0002056282 -0.0015085026 -0.0018880948 0.0007640589 -0.0026007888 0.0067048763 0.0035414117 0.0016206018 -0.0145888747 -0.0025159508 0.0015737960 0.0053988815 0.0004032955 0.0009439331 0.0038244320 0.0004322673 -0.0003788481 -0.0053018263 0.0002930361 -0.0009262805 0.0024386212 -0.0007662741 -0.0024957396 -0.0052817232 -0.0023857265 0.0060693538 0.0133573593 0.0026317173 -0.0004312546 -0.0071420015 0.0000840430 0.0001180146 0.0017648709 0.0000911174 0.0035003407 -0.0079947259 0.0024000048 -0.0053855109 0.0165444260 -0.0044441074 -0.0019674323 0.0067044008 -0.0053765378 0.0150387518 -0.0059991134 0.0170763247 -0.0186483032 -0.0251684069 -0.0282293214 0.0044831644 -0.0084041736 0.0213830191 -0.0062077040 0.0026825395 -0.0046516682 0.0512487519 0.0191083721 -0.0004024034 -0.0086577000 -0.0201057914 0.0094346545 -0.0154163715 -0.0167173916 0.0143549618 -0.0308779369 -0.0179904645 0.0098764710 0.1331293669 -0.0553556045 -0.0855282540 -0.0054995282 -0.0227685108 0.0031461227 0.0283108691 0.0351088677 -0.0144736268 0.0060425437 0.0512753255 0.0061803988 -0.0059288818 -0.0507015036 -0.0143264101 0.0143106536 -0.0433800041 0.0151498522 -0.0004153371 0.0233643565 -0.0008639935 -0.0206778233 0.0271430862 -0.0093118724 0.1379072732 0.0098548091 0.0633855582 0.0364159766 0.0206554488 -0.0128232358 0.0264950396 -0.0300012015 0.0169567448 -0.2132426902 -0.0406504793 -0.0554697877 0.1267909081 -0.1961326034 -0.1300526923 0.2373574576 0.2816111618 0.2470957284 -0.0340034384 0.0700566538 -0.0719556510 -0.0217336443 -0.0118827803 0.0180144823 -0.0041728810 0.0010726728 0.0078422941 -0.0055162042 -0.0059229364 -0.0089165492 0.0055995380 0.0056105390 0.0011909034 -0.0031632076 0.0005534707 0.0046725161 0.0121124831 -0.0003311623 -0.0129918635 -0.0229330322 -0.0279621904 0.0009495625 0.0254924640 0.0687411321 0.0380424659 -0.0140578857 0.0080263405 0.0470499565 -0.0100698049 0.0163123222 -0.0275629620 0.0172120336 -0.0165240979 0.0033864878 -0.0168283545 0.0203012896 -0.0030384960 0.0537822198 -0.1201658445 0.0452482119 -0.0089226377 -0.0123620019 0.0011458809 -0.0196253709 -0.0105043698 0.0120435864 0.0065960792 0.0101460729 0.0275138965 0.0128996166 0.0063721080 -0.0391965743 0.0184721043 0.0116136970 0.0127062869 0.0114573282 0.0038861426 -0.0190291653 -0.0478597024 0.0086231997 0.1491564442 -0.0089043484 -0.0960599895 -0.1260922046 -0.0308242045 0.0326258188 0.0921611788 -0.0283607359 -0.0411170947 -0.0945187915 -0.1423838970 -0.0925049039 0.0351125436 0.0147761333 0.0137511436 -0.0072794056 -0.0804281132 -0.0003332869 -0.0306665490 -0.0377177023 0.0317870674 -0.0057714031 -0.0381072288 0.0714731999 -0.0424972558 0.0039781384 -0.0039252448 0.0059926913 -0.0044691233 -0.0037592782 -0.0045746715 0.0015681618 -0.0030513916 -0.0009527706 -0.0016328497 0.0017374162 0.0028513173 -0.0036094796 0.0030432238 0.0008749988 -0.0002130017 0.0020891609 -0.0002105562 0.0127550305 -0.0023504464 -0.0125504947 -0.0051265375 0.0084656775 0.0137075419 0.0026258951 0.0039765766 0.0049914677 0.0078408492 0.0024896195 -0.0239724747 0.0010969674 -0.0037511930 -0.0006011338 -0.0053557612 0.0058420051 -0.0035366472 -0.0010430389 -0.0096819249 -0.0035917401 0.0185823984 -0.0039423018 -0.0045261712 -0.0078606071 0.0018912033 0.0082453827 -0.0020219813 -0.0006918223 0.0037828850 0.0004263523 -0.0009420917 -0.0016015392 -0.0193102188 0.0030634957 0.0097141167 -0.0179151037 -0.0012891292 0.0192553575 0.0095953389 -0.0099641526 -0.0186789988 -0.0471942062 -0.0133236690 0.0175041392 0.0053709561 0.0010970955 0.0037489418 0.0134625465 0.0091672273 0.0076873040 -0.0129350243 -0.0024957805 0.0034490860 0.0183828238 -0.0032638879 -0.0199247030 -0.0094177368 -0.0057263148 -0.0054151030 0.0871946882 0.0788166628 0.0154541834 0.0174550833 0.0176287415 -0.0024072446 0.0039070192 0.0013880328 0.0005571250 0.1017897825 0.0533256005 -0.0029889138 0.0365366200 -0.0191518601 -0.0379866037 -0.0076098212 0.0020818571 -0.0046762900 0.0201162381 -0.0195761003 -0.0126097095 -0.0201021772 0.0127669550 -0.0013058305 0.0086706729 0.0016151721 0.0094728044 0.0041991119 -0.0075936078 -0.0002945154 -0.0034705313 -0.0098596341 -0.0087653333 0.1200254001 -0.0598805759 0.0774707582 0.0050242672 -0.0040888176 0.0016808923 -0.0037262276 -0.0074823657 0.0172458360 0.1116437726 -0.0250331413 0.0740874263 -0.0001288219 -0.0005680468 -0.0007210916 -0.0003298234 -0.0005042257 0.0001576337 0.0002824217 0.0007980888 0.0013493417 0.0009482304 -0.0004517791 -0.0027706110 0.0034172314 0.0292909815 0.0009197662 0.0056373496 0.0331182042 -0.0003430602 -0.0121876118 -0.0444653854 0.0025598635 0.0024522620 0.0128920106 0.0005731248 -0.0414177527 -0.0411726894 0.0153117311 0.0787537726 0.1067125020 -0.0361934024 -0.0079322737 -0.0353617897 0.0015239080 0.0074914389 0.0120330083 -0.0032476290 -0.0021414556 -0.0385176928 -0.0065009136 -0.0133514768 0.0908194045 0.0141995018 -0.0047699122 -0.0335719553 -0.0004828086 -0.0056322762 -0.0278394191 -0.0019365347 0.0029194299 0.0353580588 -0.0010361780 0.0037020016 -0.0144096822 0.0032043967 0.0105340818 0.0359413775 0.0065731139 -0.0417190872 -0.0833817854 -0.0162022759 0.0013872306 0.0466944145 -0.0014406037 -0.0006691008 -0.0129129545 -0.0003803027 -0.0312960196 0.0535294335 -0.0198484820 0.0425656878 -0.1274514844 0.0333382102 0.0121879829 -0.0533235414 0.0289249144 -0.1097435279 0.0443592669 -0.1172061974 0.1095670642 0.1685999352 0.1998415081 -0.0366897774 0.0473641691 -0.1575808328 0.0333701990 -0.0388001930 0.0334507557 -0.2625715238 -0.0638359448 0.0689237718 -0.0095915365 0.1583493590 -0.0561887698 0.0656000520 0.0881069670 -0.1334751472 -0.0001087332 -0.0001485933 0.0000267899 0.0005958746 -0.0014312141 -0.0002494975 -0.0006918705 -0.0010992603 0.0001129918 0.0007813062 0.0018971773 -0.0001267314 0.0023080823 0.0001912493 -0.0010113133 0.0007063806 -0.0026647323 0.0013115318 -0.0015342781 -0.0032694682 -0.0004055702 -0.0073355623 -0.0045805956 0.0019749618 0.0089068989 0.0023029692 -0.0097426481 -0.0245745373 0.0001673545 -0.0513682447 -0.0010384927 0.0005378405 0.0000314232 -0.0017674451 0.0012517527 0.0000850300 0.0056654992 0.0009236157 0.0012760510 -0.0032615051 0.0048587319 0.0032405250 -0.0059362979 -0.0069045676 -0.0060969123 0.0002247767 -0.0002622275 0.0022749497 0.0041196115 0.0031442908 -0.0027573103 0.0004930308 0.0000807909 -0.0006487916 0.0007543339 0.0002686190 -0.0005307978 -0.0009604001 -0.0006220917 0.0006622939 0.0002810165 0.0000365866 -0.0004423084 -0.0009317834 -0.0000164508 0.0014309921 0.0011171477 0.0010893888 -0.0005719214 -0.0024712785 -0.0046261202 -0.0017541234 0.0018754942 -0.0010582372 -0.0047200794 0.0001980298 0.0017178124 0.0029345409 -0.0004163211 0.0006508693 0.0001247102 0.0003933997 -0.0010410547 0.0004131437 -0.0034868084 0.0081727398 -0.0048076957 0.0000498344 0.0004162970 0.0004044798 0.0004226572 0.0002196023 -0.0002777178 0.0000216785 -0.0001664490 -0.0007097271 -0.0003367708 -0.0000740577 0.0010615481 -0.0004516215 -0.0003724928 -0.0004358466 -0.0001777126 -0.0000392165 0.0003779391 0.0017664518 0.0000592003 -0.0047787402 0.0004033474 0.0021450535 0.0032385530 0.0009087739 -0.0005894844 -0.0032711671 0.0007926685 0.0009805179 0.0021492895 0.0030044775 0.0019710726 -0.0007731418 -0.0007978367 -0.0006109372 0.0003459203 0.0036600398 -0.0012185712 0.0005843797 0.0049270300 0.0177128612 0.0391748168 0.0015707609 -0.0029360753 0.0016230904 -0.0000869607 0.0001100542 -0.0003522849 0.0001902596 0.0001692233 0.0002294749 -0.0000971368 0.0002986191 0.0000362232 0.0001852227 -0.0002483683 -0.0000752468 0.0004399864 -0.0004826736 0.0003469875 -0.0000315840 -0.0001550698 0.0000359333 -0.0006296304 0.0001312772 0.0006083472 0.0002673555 -0.0003903885 -0.0006225511 -0.0004689759 0.0003775723 -0.0008891184 -0.0009069485 -0.0002990263 0.0019619718 0.0003402213 0.0006721962 -0.0008836244 0.0002788953 0.0001696915 -0.0008358135 -0.0024841353 -0.0015308679 -0.0000402370 -0.0033066763 0.0012543321 -0.0017492890 0.0006043562 -0.0001444265 -0.0006471809 0.0000476582 0.0001483299 -0.0001169797 -0.0000526442 0.0000889699 0.0001522166 0.0008124873 -0.0001729064 -0.0004511150 0.0007120624 0.0000782037 -0.0007939135 -0.0004237119 0.0004739154 0.0007801639 -0.0005785900 -0.0003923221 0.0004507484 -0.0002129026 0.0001227223 0.0000979684 0.0002001514 0.0001723955 0.0000591699 0.0004104877 0.0001129552 -0.0000378934 0.0002310590 -0.0000170942 -0.0002567233 -0.0001631912 -0.0001587718 -0.0002925716 0.0001142699 -0.0006157086 0.0005347951 0.0006535852 -0.0003191803 0.0001585448 -0.0001503944 -0.0000612573 -0.0000122472 0.0008719863 0.0000230374 -0.0000198448 -0.0000720458 -0.0002675981 -0.0003217626 -0.0509237476 0.0240236916 -0.0324349464 0.0430178373 -0.0417915942 -0.0157653733 -0.0009215111 0.0070650746 0.0141375641 -0.0457671183 0.0226708781 -0.0401209551 0.0479133592 -0.0487665089 -0.0065677945 -0.3300933555 0.2641437376 0.0794286548 0.4228649182 -0.1564510664 0.2921411513 -0.0014110746 -0.0004816236 0.0039121803 -0.4292090358 0.3393815067 0.1246951953 0.3565445847 -0.1218367922 0.2129986844 -0.0000171005 0.0000122406 0.0000393542 -0.0000315967 -0.0000016932 -0.0000292669 -0.0002983239 -0.0004391097 -0.0037203667 0.0016028932 -0.0015765537 -0.0042825670 -0.0001459077 0.0016071692 0.0003184724 -0.0000566079 0.0027329713 0.0002164529 -0.0008112663 -0.0028609936 0.0001191458 0.0003246954 0.0008156417 -0.0000569689 -0.0027998300 -0.0025472807 0.0014513162 0.0050928269 0.0067761670 -0.0024783596 -0.0003400436 -0.0022326838 0.0001405829 0.0006437506 0.0007262017 -0.0003777796 0.0017818562 -0.0029011575 -0.0027650877 -0.0007081398 0.0067549932 0.0014260966 -0.0000145125 -0.0010264136 -0.0002928514 -0.0003741518 0.0014418469 -0.0005532334 -0.0002296694 -0.0004420715 -0.0001211121 0.0004739308 0.0009047773 0.0002687471 0.0014080326 -0.0006699070 0.0019584773 0.0018684483 0.0023654715 0.0000733828 -0.0008395558 0.0003314529 -0.0000983201 0.0012292583 -0.0013232414 0.0006354947 -0.0025097193 0.0004889736 -0.0038215337 0.0029765519 -0.0071524108 0.0031093245 -0.0004618805 0.0021271338 -0.0010781032 0.0042966396 -0.0017004221 0.0046534301 -0.0043061947 -0.0066768558 -0.0078379548 0.0014790229 -0.0017352600 0.0061749914 -0.0015273815 0.0014078675 -0.0011906320 0.0111686939 0.0021903004 -0.0029826213 0.0003777969 -0.0062025793 0.0021168572 -0.0021738286 -0.0024218342 0.0044478357 0.0000614989 0.0004689635 -0.0007127984 -0.0002350268 -0.0002124793 -0.0012689762 0.0003207421 -0.0004325303 -0.0001092090 -0.0002434030 -0.0002272636 0.0002646436 0.0008391474 -0.0013399850 -0.0004757466 0.0014390323 0.0018905615 0.0012359033 -0.0006513737 0.0004760135 -0.0003919685 -0.0000825715 -0.0005857258 0.0001533257 0.0009037066 -0.0008532981 0.0000907475 -0.0054688737 0.0000036237 -0.0033898068 -0.0039954497 -0.0017686037 0.0013897102 -0.0028759270 0.0025652255 -0.0012941117 0.0150335329 0.0037842335 0.0036031248 -0.0080379992 0.0112453861 0.0081209571 -0.0175942907 -0.0195750041 -0.0165185608 0.0591545222 -0.1568733797 -0.0401371235 -0.4248101903 -0.3265568287 0.2614933487 -0.0418810321 -0.0134834812 0.0493408478 -0.0561347319 -0.0136908955 0.0779692374 0.0801908487 0.0379932113 -0.0806277152 -0.0088217440 0.0066596573 0.0324292930 0.0567780333 -0.0056961911 -0.1219362988 -0.0405587477 0.0003748134 0.0662438504 0.1611894589 0.2046728322 0.0280923096 -0.1421448625 0.1004169109 0.3407844265 -0.0021736697 -0.2925710153 -0.2573567110 -0.0156943006 -0.0077882057 -0.0225219466 0.0201058077 0.0235528379 -0.0197464398 0.1315873666 -0.2291532257 0.1061147111 0.0015911975 -0.0063539013 -0.0190776712 -0.0069387636 -0.0057693285 -0.0037336208 -0.0030705101 0.0027833483 0.0138469611 0.0044237990 -0.0032770532 -0.0151926638 0.0042825439 0.0073935685 0.0127687285 0.0042640042 0.0022561253 -0.0010465150 -0.0378801661 -0.0071045922 0.1025592985 -0.0300087407 -0.0239687804 -0.0712217617 -0.0222738958 0.0017170661 0.0845401931 0.0069484064 0.0074554255 0.0040699751 -0.0583500869 -0.0395334758 0.0055678303 0.0214071318 0.0174758409 -0.0046907861 0.1053122140 0.0945396037 -0.0554832883 0.0013223270 -0.0006432263 0.0008709730 -0.0173798801 0.0298168288 -0.0219760400 0.0061858752 -0.0021919280 -0.0023690446 -0.0015290440 -0.0008286238 -0.0000755858 0.0002494360 0.0007559641 -0.0004003062 -0.0002549126 -0.0003713714 0.0004336871 -0.0005830197 -0.0000765838 0.0002898239 -0.0000466414 -0.0002080743 0.0002677470 0.0085819136 -0.0044762071 -0.0104813751 -0.0059704536 0.0069900558 0.0112695226 0.0009202487 0.0005039832 0.0010042659 0.0006775936 -0.0003893322 -0.0000155696 -0.0001679989 0.0008253926 -0.0004183881 0.0001378849 -0.0008415776 0.0016909738 0.0054578848 -0.0018475152 -0.0002230803 -0.0011820092 0.0001655800 -0.0016634989 0.0003523215 -0.0000127230 -0.0008824855 0.0004827984 0.0004181195 -0.0009910412 -0.0002135740 0.0005288200 0.0006319336 -0.0175640212 0.0037121211 0.0128342343 -0.0133688925 -0.0015067349 0.0143194199 0.0036640326 -0.0056873988 -0.0072607999 0.0008844579 0.0016522041 0.0023448964 0.0025807456 0.0006802467 -0.0013081181 -0.0033910713 -0.0019957872 -0.0006887811 0.0020430881 0.0009815302 0.0008209600 0.0021113479 0.0004259702 -0.0020972241 -0.0032349606 -0.0023067594 -0.0011491165 0.0216748219 0.0086922549 0.0039629057 -0.0261512373 -0.0028274310 0.0200670579 -0.0004824213 -0.0005538983 -0.0003814688 0.0232450061 0.0092609325 0.0041906825 -0.0195243139 -0.0023101234 0.0124318838 -0.0009983308 0.0003595987 -0.0008310179 0.0002132765 -0.0003117662 0.0000178270 0.0016272676 -0.0008267543 0.0004796643 -0.0011433452 0.0003965239 -0.0009196029 0.0008276297 -0.0004270788 0.0002186891 -0.0069108277 0.0062584322 0.0015229214 0.0034760140 -0.0005905232 0.0019311311 -0.0004790824 0.0002422888 -0.0000282495 -0.0092635850 0.0085833388 0.0024589075 0.0021830439 -0.0018699323 0.0020435001 -0.0001344582 -0.0000552273 -0.0006894582 0.0000642532 0.0005105058 0.0007747455 -0.0000541544 -0.0000563509 -0.0003407857 -0.0000749015 0.0000904476 0.0002169587 0.0000338188 -0.0002030170 0.0000249766 0.0000151722 -0.0002614856 -0.0000912215 0.0000108981 0.0002168296 -0.0000287264 -0.0000283051 -0.0003100753 -0.0000251021 0.0000234077 0.0002820551 0.0003874009 -0.0012363730 -0.0018978926 0.0006888518 -0.0000588728 0.0002072443 0.0000654118 0.0000846408 0.0001463221 -0.0000339924 0.0001257272 0.0001689937 -0.0000375888 -0.0000780678 0.0010116668 0.0002763330 -0.0003827586 0.0003236835 -0.0002421117 -0.0000520849 0.0006337856 -0.0000925076 -0.0000137343 -0.0005851463 0.0000414674 0.0000631856 0.0001635434 0.0000312824 0.0009742055 -0.0007053309 0.0007227214 0.0006135261 0.0009646655 0.0001928994 0.0001214926 -0.0007319385 0.0001247172 -0.0000136869 0.0002471602 -0.0000166068 0.0014240612 -0.0009526040 0.0007355141 -0.0011346939 0.0030700533 -0.0007357642 0.0026242129 -0.0217689500 0.0143531912 -0.0448390100 0.0148574703 -0.0489636147 0.0604964134 0.0758559418 0.0813498447 -0.0059947386 0.0295816314 -0.0583224538 0.0116998412 -0.0109902070 0.0169854365 -0.1096632330 -0.0313108192 0.0215803297 0.0230879209 0.0568647550 -0.0288819815 0.0101228804 0.0210454424 -0.0436474940 -0.0039319809 0.0091466391 -0.0096956931 0.0201298608 -0.0080960815 -0.0533136057 0.0077496466 -0.0065159141 0.0009836155 -0.0027305227 -0.0052441733 0.0011260737 -0.0034909455 -0.0007516587 0.0016468147 -0.0014077128 0.0029201154 -0.0004392919 -0.0005901477 0.0028036939 -0.0006298315 0.0003909318 -0.0024991756 0.0001391596 0.0006000723 -0.0007268609 0.0002820184 -0.0056720047 -0.0019460848 -0.0026803912 0.0007935548 -0.0000532682 0.0003369395 0.0030256671 -0.0008012231 -0.0018530961 0.0011820672 -0.0000810108 0.0001361685 -0.0013461642 0.0021783725 0.0011497089 -0.0015276110 -0.0018787660 -0.0017955109 -0.0031259099 0.0086558920 -0.0001229287 0.0139123277 0.0101753887 -0.0086312630 0.0014427287 0.0002290667 -0.0018281107 0.0020831585 0.0003563208 -0.0020917467 -0.0022913450 -0.0010375654 0.0022610959 0.0004480389 -0.0011280686 -0.0007404529 -0.0028238070 0.0011321077 0.0036998861 0.0011769644 -0.0004200665 -0.0021132341 -0.0040818039 -0.0049833763 -0.0001910076 0.0013908440 -0.0013735341 -0.0141562694 0.0116147534 0.0021073611 0.0157346917 -0.0000925437 0.0006214953 0.0011492790 -0.0001341079 -0.0017467321 0.0007780387 -0.0069226716 0.0158364472 -0.0107265269 0.0004477037 0.0007988503 0.0007202300 0.0012129713 0.0003944710 -0.0000690452 -0.0003118792 -0.0007808193 -0.0018172464 -0.0008152824 0.0002712641 0.0020882685 -0.0011915945 -0.0003844416 -0.0012370581 -0.0007355225 -0.0002734416 0.0010961606 0.0041041714 0.0008248311 -0.0140007201 0.0039742874 0.0035469685 0.0099556898 0.0059180737 -0.0046829850 -0.0090528322 0.0019066352 0.0033252264 0.0063889664 0.0060760246 0.0051519325 -0.0013050283 -0.0004715322 -0.0002324790 0.0002735436 -0.0036301544 -0.0037946636 0.0022591499 0.0014979173 -0.0013929904 0.0006827394 0.0017881158 -0.0030789958 0.0021434261 -0.0001749166 -0.0000236516 -0.0003872646 0.0001057953 0.0000909577 0.0001408799 0.0000400896 0.0001222481 0.0000946220 -0.0000090185 -0.0000679854 -0.0001046949 0.0001185054 -0.0001345842 -0.0000336434 -0.0000559424 -0.0000752120 -0.0000418329 -0.0008017647 0.0002742860 0.0008846444 0.0004657388 -0.0004821956 -0.0008814948 -0.0000346764 0.0000055533 -0.0001275970 -0.0000984376 -0.0000947377 0.0007321228 -0.0000079434 0.0001522894 -0.0001889437 0.0000475397 0.0001164063 -0.0003263425 -0.0007745823 0.0004367911 0.0001405833 -0.0006086763 0.0000876927 -0.0000783725 0.0003860547 -0.0001196283 -0.0002646285 -0.0001165099 0.0001110826 0.0001397277 0.0000979869 0.0000138653 0.0000095961 0.0008927926 -0.0002703316 -0.0005415195 0.0007419516 -0.0000413784 -0.0009563507 -0.0001690174 0.0003123039 0.0005429777 0.0009547898 0.0203100707 0.0369087669 0.0561143489 -0.0002518599 -0.0513190900 -0.0561869333 -0.0329538367 -0.0087758956 -0.0234290118 0.0010610649 0.0219796279 0.0503002118 0.0082184772 -0.0408266775 -0.0575486520 -0.0252848834 0.0111636888 0.3779091990 0.1589999374 0.0272837960 -0.3796623745 -0.0072912389 0.2471514918 0.0084109016 -0.0020141620 0.0018529920 0.5518010175 0.2676934143 0.0964899615 -0.3709372580 -0.0175224131 0.2673627557 0.0002447489 -0.0000403871 -0.0000363766 -0.0006062800 0.0005700078 0.0003396028 0.0006022204 -0.0003533549 0.0001309607 -0.0005407682 0.0000900552 -0.0005508372 0.0001029332 0.0000327696 -0.0001502787 -0.0009109918 0.0004697259 0.0005997347 -0.0034307467 0.0015612078 -0.0020683541 -0.0001282749 0.0000894763 -0.0000530652 -0.0024923557 0.0019941605 0.0002402124 -0.0025346846 0.0002505259 -0.0018454022 0.0008763849 -0.0004714665 -0.0127064083 0.0018708566 0.0014234634 0.0032313280 -0.0000145965 -0.0000317896 -0.0001181877 -0.0000267123 0.0000367180 0.0001297509 -0.0000431425 -0.0032488014 -0.0008460413 -0.0037779336 -0.0039792913 0.0015673260 0.0037983138 0.0055013833 -0.0011102421 -0.0032409228 -0.0027991615 0.0013407585 0.0189335022 0.0021355230 -0.0130150111 -0.0228175549 -0.0275591791 0.0115043627 0.0012185247 0.0053100368 -0.0002507323 -0.0002703554 -0.0006294067 0.0001067887 -0.0014296365 0.0063558008 0.0029919517 0.0034883121 -0.0158740392 -0.0039265414 0.0010486554 0.0040848499 0.0002191740 0.0010656479 0.0028071938 0.0005679744 -0.0007985971 -0.0037931176 0.0000064783 -0.0004123164 0.0013057746 -0.0004194784 -0.0041181336 -0.0036414530 -0.0041613864 0.0048748969 0.0098307981 0.0026004308 -0.0000364334 -0.0048900495 0.0002003871 -0.0001141466 0.0016312281 -0.0000942306 0.0046600588 -0.0056764701 0.0030311031 -0.0055840473 0.0162504684 -0.0043327392 -0.0005528062 0.0021653587 -0.0012453042 0.0043533983 -0.0021525117 0.0040906595 -0.0050301173 -0.0072181864 -0.0082559359 0.0012799564 -0.0022631586 0.0065302206 -0.0012772130 0.0013356877 -0.0013531734 0.0106016477 0.0023803532 -0.0027283154 -0.0008010289 -0.0055636153 0.0023971532 -0.0021033443 -0.0027843500 0.0043996878 0.0010549765 0.0005889805 -0.0006041848 -0.0053560222 0.0012622219 0.0031590523 0.0000914978 -0.0000205580 -0.0002184077 -0.0006854091 0.0000600995 0.0003012841 0.0016895750 -0.0026615246 -0.0010130709 0.0014249567 0.0009060826 0.0014252904 -0.0004719475 -0.0001209917 -0.0004186054 0.0002667949 -0.0000504543 0.0003039165 0.0006616496 -0.0005472392 0.0000691220 -0.0034608044 0.0003781735 -0.0022532251 -0.0057761732 -0.0026416066 0.0014929316 -0.0043990024 0.0038769765 -0.0018903511 0.0223915636 0.0026253606 0.0044273705 -0.0140750592 0.0209290814 0.0145166215 -0.0239272627 -0.0265157953 -0.0241185265 0.0329708572 -0.1253844487 0.1017987983 0.1908394667 0.1385733213 -0.1198046136 0.0180726863 0.0032129134 -0.0267066339 0.0156248428 0.0028112526 -0.0366156738 -0.0261426451 -0.0096356805 0.0302856237 -0.0029433461 -0.0018490425 -0.0016202672 -0.0190953149 0.0030146708 0.0483542582 0.0174206967 -0.0001345597 -0.0241813269 -0.0457673790 -0.0472655033 0.0051135470 0.0239018770 -0.0233715229 -0.0536679048 -0.0154500227 0.1051925132 0.0828321856 0.0178258039 -0.0086010427 0.0082882027 -0.0297526847 0.0530705623 -0.0305158913 0.1536106039 -0.5304979194 0.4702898764 0.0166626824 -0.0079564294 -0.0140902457 0.0012101110 0.0010435641 0.0012400889 -0.0140259663 -0.0033693420 0.0039098560 -0.0017748946 -0.0029174693 -0.0086301074 0.0007561015 0.0027217860 0.0072407933 -0.0032009472 -0.0031830755 -0.0013799124 -0.0336193624 -0.0282307380 0.0824154747 -0.0093399437 -0.0323211719 -0.0372054732 -0.0113837557 0.0052898691 0.0313954751 -0.0016165613 0.0061475668 0.0070740607 -0.0038917548 -0.0055760719 0.0034574558 -0.0076389112 -0.0062851392 -0.0001922138 -0.0325547221 -0.0522979115 0.0323558698 0.0005173545 -0.0001653003 0.0002754984 -0.0514796156 0.0744296193 -0.0639317174 0.0088288575 -0.0034795307 0.0011256293 -0.0025600821 0.0002529291 0.0003891416 0.0000764700 -0.0000365037 -0.0013172350 -0.0004181602 -0.0001663111 0.0015217361 -0.0013208386 0.0005712219 0.0008313292 0.0002373477 0.0001259867 0.0006767791 0.0197826316 -0.0089256056 -0.0233408792 -0.0117064769 0.0142972140 0.0240543682 0.0017721789 0.0010802486 0.0025034696 0.0017211531 0.0000590979 -0.0061303313 -0.0002313717 0.0005801712 0.0003308101 -0.0003271579 -0.0014230735 0.0030249476 0.0116483953 -0.0047781775 -0.0007013859 0.0021663894 -0.0004377321 -0.0027710653 -0.0019932505 0.0007917310 0.0000504819 0.0012205912 0.0000884674 -0.0019182808 -0.0012835333 0.0005808217 0.0008558104 -0.0323433355 0.0068712435 0.0179383257 -0.0268847457 -0.0025474735 0.0301133054 0.0084084062 -0.0115888489 -0.0185588810 0.0016100652 0.0006467537 0.0003387655 0.0007683629 -0.0001661706 -0.0018679949 -0.0014952167 -0.0010066234 -0.0008390124 -0.0014077245 -0.0001098525 0.0007108520 0.0003673954 0.0007748035 0.0001083129 -0.0005188288 0.0000569331 0.0007881032 0.0016052024 -0.0026096082 -0.0009757742 -0.0017727144 -0.0023755658 0.0003290738 0.0000717770 -0.0004266558 0.0003807454 0.0136229363 0.0041246555 0.0051279369 -0.0107305784 0.0008925520 0.0089793897 -0.0006264513 0.0004491799 0.0001520351 0.0003285469 -0.0001775552 0.0002164233 -0.0000281367 0.0001398551 -0.0000418385 -0.0004557544 0.0000434799 -0.0005243569 0.0003839282 -0.0004447687 -0.0003092497 -0.0050249869 0.0059036217 0.0018295427 0.0054326276 -0.0014703521 0.0042018972 -0.0000535356 -0.0001253439 0.0000867935 -0.0004537864 0.0009085350 -0.0006678399 -0.0014183514 0.0001337858 -0.0019852492 0.0002301940 0.0002385435 -0.0004391294 0.0001872465 0.0003713479 -0.0004509525 0.0000465776 0.0000268212 -0.0000217251 0.0000411089 0.0000255227 -0.0000560600 -0.0001575761 -0.0002834104 0.0001498204 -0.0003528866 0.0003845357 0.0002344244 0.0000067642 -0.0000016781 -0.0000594645 -0.0000075991 -0.0001367603 -0.0000003863 0.0001495465 0.0000447953 0.0003144885 -0.0009047434 -0.0012725688 0.0004556549 0.0000221432 0.0000511133 0.0000080114 0.0001896746 0.0001008827 -0.0001241812 0.0018184465 -0.0003698104 -0.0013294148 -0.0000055979 0.0014456122 0.0004586583 0.0000649131 0.0004008592 0.0000697759 0.0003356354 0.0004568599 0.0001175304 -0.0002219070 -0.0004747898 -0.0001226293 0.0001148070 0.0001129078 0.0000688289 -0.0007531257 -0.0004322674 -0.0000629506 0.0005499036 0.0007079965 0.0001294112 -0.0000105975 -0.0007027938 0.0000553521 0.0000008040 0.0002918431 -0.0000098520 0.0003733415 -0.0008459545 0.0000652483 -0.0012816107 0.0036067965 -0.0008978077 0.0141910200 -0.0536396424 0.0364138015 -0.1054662057 0.0507941311 -0.1009261824 0.1395574442 0.2041587569 0.2279617569 -0.0241821146 0.0607250396 -0.1500308877 0.0351736689 -0.0266081236 0.0371977978 -0.2703487686 -0.0713214051 0.0552694476 0.0433164651 0.1434952784 -0.0661229567 0.0392969293 0.0607700680 -0.1081058492 0.0005627586 0.0002372591 -0.0002821220 -0.0028877911 0.0002298142 0.0014131850 -0.0005114487 -0.0003207451 0.0001658969 0.0001138013 -0.0001514851 -0.0000900798 0.0007604572 -0.0011746547 -0.0005470677 -0.0024388128 -0.0038010411 0.0002882560 -0.0027042697 -0.0007088616 -0.0017829293 0.0043283623 -0.0020044184 0.0012553162 0.0011995772 -0.0040878791 -0.0007407838 -0.0030953104 -0.0011682961 -0.0006032372 0.0026187246 0.0014961028 0.0015733172 -0.0011366895 0.0008472758 0.0002313517 0.0041317854 0.0012188734 0.0009271917 -0.0025277932 0.0032299435 0.0023298537 -0.0048985853 -0.0056087291 -0.0045288380 0.0004116495 -0.0000517506 -0.0002461556 -0.0046520063 -0.0036555661 0.0028692185 -0.0004879625 -0.0002157942 0.0005335247 -0.0004229547 0.0001680574 0.0010697012 0.0006037141 0.0005491519 -0.0004299468 -0.0000594655 -0.0002522063 -0.0001726805 0.0002944128 0.0001630467 -0.0007015796 -0.0001934123 -0.0003005943 0.0002954388 0.0021382665 0.0028624090 0.0014773106 -0.0000129636 -0.0002434713 -0.0006089678 0.0011212753 -0.0017666214 -0.0006574550 -0.0000239617 0.0002740077 -0.0005141367 0.0005138884 -0.0013417246 0.0006352220 -0.0028791123 0.0085001780 -0.0069214037 -0.0001709562 0.0003518662 0.0001257911 0.0003123840 0.0001725105 -0.0001357691 0.0001048369 -0.0001443486 -0.0005785208 -0.0001164231 0.0000759346 0.0005303159 -0.0003986449 -0.0002010915 -0.0000496946 -0.0000252073 0.0000639771 0.0002872494 0.0016468180 0.0001154418 -0.0042264769 -0.0000326681 -0.0003791856 0.0004497648 -0.0003093815 -0.0009657510 0.0009309300 0.0009309217 0.0008511360 0.0018786888 0.0029166797 0.0018967992 -0.0006292201 0.0002826074 0.0003348048 -0.0000772596 -0.0006881393 -0.0016418822 0.0015815205 -0.0048617312 0.0066954883 -0.0020457942 0.0008695477 0.0002526462 0.0013034739 0.0001855516 0.0008656272 0.0010387563 0.0000362102 -0.0000090300 -0.0007475755 -0.0005990498 -0.0010740100 0.0005805987 -0.0007652244 0.0000137579 0.0006964237 0.0021230002 0.0008487211 0.0004921013 -0.0000084162 0.0008172775 -0.0002902153 -0.0000314490 0.0000094141 0.0000515219 -0.0002502510 -0.0001926704 -0.0002425879 0.0001034966 0.0087301221 -0.0032564056 0.0070426396 0.0003672297 -0.0097214108 -0.0001758587 -0.0046664871 0.0015637074 -0.0031776474 -0.0033827657 -0.0020621910 -0.0115986824 -0.0090806173 -0.0029271051 -0.0020325269 0.0028411333 -0.0034094226 -0.0003312091 0.0004992673 0.0007590024 -0.0001436981 -0.0017216509 0.0001214147 0.0020896654 -0.0031384408 -0.0024263507 0.0009254906 0.0002446880 0.0005669192 0.0012556907 0.0001110439 -0.0010514454 -0.0007248333 0.0003889712 0.0017558234 0.0011285303 0.0004078826 -0.0000705292 0.0000438288 0.0002152291 0.0003021953 -0.0006034850 -0.0002044710 -0.0001026923 0.0020166270 0.0005829513 -0.0003766645 -0.0000613493 0.0000072994 0.0000050129 -0.0004173183 -0.0004787742 -0.0004747774 -0.0001079490 -0.0003691901 0.0003941404 -0.0052156082 -0.0006585990 0.0044645232 -0.0004888885 -0.0001709079 0.0001035753 -0.0023350856 -0.0016025909 -0.0005632121 -0.0031653387 -0.0002983910 0.0016922850 0.0243579444 0.0221989508 0.0905722801 0.0066658706 0.0174246141 0.0273394777 -0.2064088761 0.1217810784 -0.0417706390 -0.0014658893 -0.0180785577 -0.0292445075 0.0166925465 -0.0520504187 -0.0799361156 -0.0566765880 0.1275650689 0.1292769435 0.4556184030 -0.1403779290 0.4342367074 0.0452151763 -0.0253599937 0.0103002756 0.4403073519 -0.4072971795 -0.2339685597 -0.0848577371 -0.0361322059 -0.1585051909 -0.0000522934 0.0000482808 0.0003482976 -0.0002032847 -0.0000666743 -0.0003255109 0.0141825774 0.0075895735 0.0662411160 0.0207351688 -0.0274768743 -0.0603952157 -0.0004661907 0.0009546638 0.0003754448 0.0002369808 0.0013962737 0.0000993453 -0.0006759263 -0.0014844680 0.0002248084 0.0004048354 0.0004130206 -0.0001581837 -0.0035485215 -0.0008738494 0.0019887091 0.0044186941 0.0054261794 -0.0021220342 0.0001774547 -0.0014483814 -0.0000528748 0.0000553547 0.0005934983 -0.0000286758 0.0031832227 -0.0023309445 -0.0032215171 -0.0013159358 0.0066136087 0.0017567650 -0.0035361562 0.0056004257 -0.0024651426 0.0026718922 0.0061578087 0.0021069388 -0.0029188795 -0.0083703132 -0.0008514808 0.0014199583 0.0017423274 0.0006519993 -0.0095857193 -0.0083953500 -0.0076516876 0.0166851544 0.0252757884 0.0082303631 0.0020713316 -0.0090438711 0.0014443561 -0.0021482441 0.0041891714 -0.0013484705 0.0268487011 -0.0121316138 0.0167661487 -0.0201192947 0.0522609550 -0.0149078955 -0.0001202952 -0.0000051587 -0.0009273935 0.0003827999 -0.0001973881 0.0004463674 -0.0019780425 -0.0021028674 -0.0020605803 -0.0008709279 -0.0015180401 -0.0002350036 -0.0002274971 -0.0001820936 -0.0006837564 0.0014990326 0.0023802603 0.0015763355 -0.0023662262 -0.0000408478 0.0004047831 -0.0009851385 -0.0026221698 0.0024193268 0.0096699005 0.0003370926 -0.0067840600 -0.0560546473 -0.0086857016 0.0205871277 -0.0216898803 -0.0157050352 0.0083395604 -0.0008045092 -0.0246799770 -0.0038135450 -0.0027063095 -0.0100010941 0.0008448903 -0.0006767314 -0.0090401363 -0.0004808691 -0.0058717034 -0.0222756188 -0.0036373242 0.0171056198 -0.0219567307 0.0078985831 -0.0098455961 0.0016581741 -0.0056884290 0.0603789590 -0.0278893542 0.0296400209 0.0088398840 0.0044024709 0.0016924659 -0.0060559923 0.0067156660 0.0014601586 -0.0017624708 -0.0013341272 0.0005585840 0.0009474345 -0.0011415955 -0.0002564299 0.0014052065 0.0016757977 0.0018580281 -0.0001898835 0.0004552172 0.0008560805 0.0083794769 0.0059588424 -0.0054738749 0.0008565396 -0.0000895781 -0.0012848460 0.0007655570 -0.0003824984 -0.0013867016 -0.0006053350 -0.0001770000 0.0008103297 0.0000506198 -0.0006466341 0.0009178473 -0.0021647729 0.0010912700 0.0010748002 0.0003944331 -0.0004151233 -0.0009584209 -0.0005278965 0.0007928204 0.0012375565 -0.0041479372 0.0025770481 -0.0003390060 0.0116086733 -0.0084767816 0.0088245725 0.0003336743 0.0002414599 0.0002166956 -0.0005946750 0.0000181207 0.0004484075 -0.0001183007 -0.0014778685 0.0013556980 -0.0003401720 -0.0000094610 0.0006928279 -0.0000475629 0.0001563530 0.0001680617 0.0001321062 0.0002419854 0.0004308786 0.0000927490 0.0000341236 -0.0007498453 0.0000891522 -0.0001159791 0.0003333847 0.0002536837 0.0000145741 -0.0008596387 0.0009675448 -0.0017785136 0.0023048666 -0.0004056669 -0.0015577537 -0.0024940888 -0.0024633591 0.0015084114 0.0028628496 -0.0003099688 -0.0024083366 -0.0028834140 0.0000831704 -0.0001962842 0.0002134203 0.0000091045 0.0000399410 0.0000065506 -0.0018820006 -0.0013753772 0.0005880842 -0.0279343579 0.0189317247 -0.0067547649 -0.0000445335 -0.0000282181 -0.0001210728 0.0001276488 0.0001834681 0.0001770102 0.0000143121 0.0000704931 -0.0000630988 -0.0000532448 -0.0001697718 -0.0000050116 0.0000565967 0.0000956801 -0.0000074151 -0.0002183943 0.0000634741 -0.0000988598 0.0000620381 0.0000701434 -0.0000270969 -0.0000155507 0.0000192650 -0.0000117983 -0.0000682335 -0.0001438001 -0.0000696539 -0.0000366401 -0.0002514197 0.0000682459 -0.0001678705 0.0001135584 -0.0004109853 0.0000020078 -0.0000457952 0.0001610997 0.0003381768 0.0001954195 0.0004487845 0.0008107201 0.0002173358 -0.0000040573 0.0008967370 -0.0002629092 0.0007420665 -0.0003534332 0.0000591343 0.0004117260 0.0000682489 -0.0001857415 -0.0000660183 -0.0000311279 0.0000134801 -0.0000451381 0.0003644189 0.0000066185 0.0001909300 0.0003283195 0.0003807802 -0.0002279283 -0.0004493726 0.0003476302 0.0005830320 0.0326240294 0.0138766444 -0.0050652571 -0.0000633579 0.0163292305 0.0349269550 -0.0176471045 0.0023863895 0.0101505309 0.1286650448 0.0367540956 -0.0285777729 -0.0005490631 -0.0091044285 -0.0129227509 -0.0234962826 -0.0302146837 -0.0350596290 0.0632293724 0.0586013313 0.0499737510 -0.3289029954 0.0017158813 0.2950768416 -0.0246198430 -0.0071632948 0.0075843457 -0.2597577026 -0.1481599763 -0.0908700521 -0.0562701846 -0.0370875522 -0.0055667082 -0.0043805632 -0.0008557456 -0.0085234986 0.0069690264 -0.0094774147 -0.0077721532 0.0087238358 -0.0052179555 0.0017415889 0.0088792639 -0.0003531806 0.0115344305 -0.0040279088 0.0052446387 0.0060868271 0.0298527444 -0.0401989592 -0.0243102172 0.0055647861 -0.0083897732 -0.0117701757 -0.0020554446 0.0011076826 -0.0004569162 0.0060910048 0.0014208179 0.0145887987 0.0339889052 -0.0037793260 0.0370295992 -0.0038550381 0.0032974611 0.0369336736 -0.0191943895 -0.0087913280 -0.0338154421 -0.0009603295 -0.0001545441 -0.0031394555 -0.0013006392 0.0014931221 0.0027641420 -0.0075535887 0.0389228873 0.0097493748 0.0237787713 0.0293427479 -0.0097965435 -0.0339682277 -0.0457122298 0.0144084441 0.0225208753 0.0226117941 -0.0096579136 -0.2390579857 0.0002328766 0.1353690644 0.2516324806 0.3065564385 -0.1167806989 0.0073697476 -0.0536788885 -0.0073751973 -0.0022849550 0.0129235804 0.0019567798 0.0833973406 -0.0771919171 -0.0779855854 -0.0445776154 0.1835898572 0.0476570985 -0.0144273828 0.0365788290 -0.0091631200 0.0186754135 0.0355810545 0.0098963968 -0.0233937937 -0.0491939892 -0.0078416517 0.0051177032 0.0103865426 0.0016563483 -0.0933690092 -0.0465494019 -0.0734460087 0.0942564635 0.1490289806 0.0476802816 0.0186154935 -0.0553255306 0.0134369069 -0.0149011379 0.0304208128 -0.0093414527 0.2389011107 -0.0806132422 0.1378764744 -0.1480383675 0.3886514500 -0.1106490603 0.0000567024 0.0000425332 -0.0000432246 0.0001871211 0.0001425526 0.0004629294 -0.0001377351 0.0000228138 0.0000708284 0.0001164967 -0.0001082687 0.0003108479 -0.0000389932 0.0000572807 -0.0000849211 0.0006368184 0.0002347922 -0.0000100019 -0.0002916680 -0.0000737512 0.0001412143 -0.0000284348 0.0000247874 -0.0000641968 0.0078197900 -0.0024968634 -0.0030911751 -0.0586403647 -0.0035951091 0.0309343596 -0.0191952380 -0.0115371261 0.0077533042 -0.0005115277 -0.0202344256 -0.0027910573 -0.0021236181 -0.0084179369 -0.0005673190 -0.0002867450 -0.0075952011 -0.0001220827 -0.0048354811 -0.0187531900 -0.0031060334 0.0142898605 -0.0181685880 0.0066273947 -0.0080648675 0.0012739727 -0.0047204850 0.0497488034 -0.0230410127 0.0243194217 0.0067958118 0.0035637473 0.0013207537 -0.0065097727 0.0062057993 0.0011936478 0.0008212006 -0.0008074483 0.0014158791 -0.0003381017 0.0004410260 0.0005836889 -0.0013161623 -0.0010849519 -0.0006538154 -0.0006223888 0.0022401266 -0.0031110456 -0.0121869424 -0.0087991749 0.0079716468 -0.0012246434 0.0000533613 0.0018273641 -0.0008065472 0.0006442204 0.0020915252 0.0007426693 0.0002492765 -0.0010765482 0.0000073008 0.0006634885 -0.0014247227 0.0026907564 -0.0011675675 -0.0013173198 -0.0006526176 0.0003628425 0.0012457527 0.0011176977 -0.0007287063 -0.0011386673 0.0064384423 -0.0041107586 -0.0031814114 -0.0123864484 0.0105074952 -0.0093349238 -0.0003326225 -0.0005002447 -0.0003748922 0.0009195686 -0.0003991361 -0.0002363241 -0.0012454274 0.0061582507 -0.0050399946 0.0002453251 0.0000156924 -0.0007417306 -0.0002902454 -0.0003865540 -0.0002541296 -0.0000431157 -0.0001856628 -0.0002698153 0.0000227951 0.0000384256 0.0009561262 0.0000800049 0.0001493241 -0.0007388428 -0.0001806302 0.0000823045 0.0010157217 -0.0015686539 0.0025841504 -0.0019506269 0.0017989728 0.0030112355 0.0050942019 0.0045116142 -0.0017594616 -0.0067818247 0.0006434953 0.0031084232 0.0036338938 -0.0032195675 -0.0021673964 0.0003024320 0.0000202547 0.0000988883 -0.0000141753 0.0034576278 0.0005306637 -0.0009564393 -0.0233495447 0.0158417194 -0.0056972248 0.0002863690 -0.0000337439 0.0004680614 -0.0002420588 -0.0001187069 -0.0000424734 -0.0000220937 -0.0001533948 -0.0000113341 0.0000616675 0.0001576293 -0.0000306589 -0.0000106246 -0.0000342744 -0.0000239517 0.0000766514 -0.0001216021 0.0000588777 -0.0000538830 -0.0000560458 0.0000369847 0.0000009426 0.0000475691 0.0000778116 0.0000928619 0.0000798073 0.0000034668 0.0000741448 -0.0003522142 0.0002400160 -0.0001433637 -0.0000650946 0.0005042779 -0.0000211280 0.0002429295 -0.0001138060 -0.0001207545 -0.0000725232 -0.0002106211 -0.0000897384 0.0002056524 0.0001404953 -0.0009085125 0.0002004888 -0.0003391104 0.0003174964 -0.0000517990 -0.0003262447 -0.0000363718 0.0001115078 0.0000038428 -0.0000429002 0.0000671204 0.0000934323 -0.0000908040 -0.0000213621 -0.0003882874 -0.0001825400 -0.0003102753 0.0001024395 0.0003976140 -0.0002999907 -0.0005071683 0.0273316707 0.0050911092 -0.0108906210 0.0092889717 -0.0238853560 -0.0593434504 -0.0003115418 -0.0206334550 -0.0254476748 -0.1707516680 -0.0486539547 0.0385808889 -0.0152278876 0.0167833440 0.0377467032 0.0365994850 0.0446355169 0.0521827775 -0.1439711233 -0.1346977247 -0.0958722169 0.3554105751 -0.0151542060 -0.3607914307 0.0336120589 0.0095609579 -0.0101039598 0.3065634327 0.1881297941 0.1380775282 -0.0037782760 0.0567466804 0.0880440953 -0.0035462293 -0.0004801904 -0.0064720819 0.0058890859 -0.0077892352 -0.0061763529 0.0059171675 -0.0035484364 0.0011712532 0.0073908557 -0.0004978170 0.0093438291 -0.0032826482 0.0040465450 0.0044926037 0.0233309318 -0.0316501466 -0.0188872189 0.0090625186 -0.0080381361 -0.0059504388 -0.0015046498 0.0008400205 -0.0003255815 0.0091786857 -0.0023569212 0.0099796897 0.0267903221 -0.0032353139 0.0291423174 0.0057576043 -0.0042524798 -0.0499716100 0.0264166987 0.0119364714 0.0451002734 -0.0006844141 -0.0000660781 -0.0019734813 -0.0009024376 0.0009636236 0.0017205715 -0.0068659444 0.0330984864 0.0077247506 0.0215717369 0.0247891157 -0.0090078376 -0.0297016748 -0.0388446514 0.0128791423 0.0201221590 0.0197635607 -0.0086624784 -0.2106111773 0.0018034395 0.1185650728 0.2196628899 0.2673027994 -0.1022527777 0.0059940608 -0.0460048214 -0.0061370839 -0.0019008034 0.0105662901 0.0016135578 0.0688346820 -0.0656371330 -0.0653670984 -0.0378822945 0.1553453136 0.0402744768 -0.0121449452 0.0302486049 -0.0076590182 0.0155753483 0.0296191344 0.0082354285 -0.0195368141 -0.0408555448 -0.0066183142 0.0042855536 0.0084594794 0.0014104924 -0.0771019885 -0.0387364454 -0.0604491413 0.0778990202 0.1228453813 0.0393125779 0.0155088791 -0.0458868281 0.0111799791 -0.0124120042 0.0253974981 -0.0077886860 0.1992402521 -0.0669811985 0.1148846213 -0.1235735947 0.3246008015 -0.0924675339 -0.0000939870 0.0000228026 -0.0001357629 -0.0000650161 -0.0002086076 -0.0003323558 -0.0004321767 -0.0008258861 -0.0008462360 -0.0002663748 -0.0001324337 -0.0003173264 -0.0001170990 -0.0001281798 0.0000127858 0.0001202242 -0.0003143972 -0.0002547998 -0.0001497983 -0.0002190010 0.0000857667 0.0001910163 0.0002048110 0.0000620836 -0.0000469263 -0.0003966176 -0.0000389850 -0.0008047244 -0.0003992426 0.0002720378 -0.0003824302 -0.0004037981 0.0001523309 -0.0004908353 -0.0001493044 0.0002582872 -0.0005644259 0.0012856942 0.0004531140 -0.0002707578 -0.0000458340 -0.0001222788 -0.0001250977 0.0002385224 -0.0000918418 -0.0002123316 0.0000907953 -0.0001023014 0.0000974213 0.0001379225 0.0000669994 -0.0009688150 0.0002032308 -0.0004979673 0.0003225501 0.0001870764 0.0000432604 0.0005987815 -0.0006135524 -0.0001182934 -0.0017583846 0.0012848173 0.0005369559 0.0021191862 -0.0037238083 -0.0023670760 0.0010271746 0.0014005716 0.0019533928 -0.0002015207 -0.0153114649 -0.0297164969 0.4109792523 0.3206324085 -0.2198952337 0.0365259880 0.0299178560 -0.0193974963 -0.0168742976 -0.0015347747 0.0275092036 0.0052718153 -0.0129367618 -0.0276217817 -0.0161258372 0.0082516701 0.0436383488 -0.0037887044 -0.0128566222 -0.0177270357 -0.0033005485 0.0061027015 0.0141337043 -0.1410904410 -0.3263254789 -0.2454833332 -0.2245357628 0.1419930331 0.5595768392 -0.0778832215 -0.2457307991 -0.1402144576 -0.0118921346 -0.0046473531 -0.0077193973 0.0127135874 0.0002404031 -0.0005075058 0.0160525207 0.0197325424 -0.0438128482 -0.0006854600 0.0004846768 -0.0027617449 0.0032456213 0.0022606415 -0.0008058803 0.0001147831 -0.0000732953 0.0004669920 -0.0007544483 -0.0019614140 -0.0027052243 -0.0011491967 0.0006311299 0.0054167858 -0.0006078766 -0.0007500806 -0.0008273817 -0.0037491801 0.0003451922 0.0079542516 -0.0183724756 -0.0141406218 -0.0308783041 -0.0233368405 -0.0022194314 0.0593950196 -0.0102293088 -0.0111241109 -0.0178732848 0.0390016066 0.0244913797 -0.0070407086 -0.0010688221 -0.0016236274 -0.0010255508 0.0365892024 0.0170450053 -0.0181895433 0.0001574292 -0.0001487861 0.0000697126 0.0037297588 -0.0043542953 0.0045229096 0.0012210411 -0.0005642683 -0.0021632742 -0.0000402973 -0.0000156279 0.0003507618 0.0002144960 0.0004316607 0.0001431800 -0.0001152045 -0.0001975341 -0.0001601568 -0.0000347242 -0.0002050399 -0.0001013826 -0.0001715520 -0.0002021046 -0.0000402807 -0.0015633296 -0.0003225559 0.0019152013 0.0004217297 0.0006319599 -0.0020892921 0.0002094762 0.0001549119 0.0000868889 0.0002936888 -0.0002908339 0.0015360568 -0.0000717473 0.0002886652 -0.0003957682 0.0001065771 -0.0000411135 0.0001533253 -0.0001042691 0.0002760298 0.0000282026 -0.0015229576 0.0002574412 -0.0001650028 0.0010449364 -0.0003015185 -0.0007604464 -0.0002247697 0.0003258720 0.0001755572 0.0002548088 0.0001500875 0.0001546206 -0.0043232792 0.0008194965 0.0077197111 0.0025834817 -0.0041222566 -0.0037360868 0.0025330649 -0.0025047243 0.0009709126 -0.0002710230 -0.0000218307 0.0001123468 0.0001699176 -0.0002551826 -0.0005848485 0.0001121782 -0.0001702236 -0.0001693161 -0.0017448493 -0.0005337394 0.0004856506 0.0000626368 0.0001619886 0.0001537356 0.0002100784 0.0003697608 0.0004924751 -0.0003986138 -0.0003892978 -0.0007829690 0.0040847067 -0.0015264311 -0.0025709639 0.0002575110 0.0001174159 -0.0002487767 0.0045681660 0.0025605909 0.0014753175 -0.0001181820 0.0003054544 0.0009014757 0.0002438031 -0.0000260103 0.0003007766 -0.0001421054 0.0001755358 0.0001138468 -0.0007368172 0.0004362833 -0.0001305593 -0.0000581572 -0.0000526192 -0.0001477014 0.0000994436 -0.0001552777 -0.0002603227 0.0005511227 -0.0003254957 0.0002210505 0.0005313061 0.0000456357 0.0006713990 0.0001256182 -0.0000296851 0.0000311486 0.0010909085 -0.0010102809 -0.0007056538 -0.0002244776 -0.0004047254 -0.0002374896 0.0000404310 -0.0001035716 -0.0007185681 0.0003910551 0.0003289121 0.0008431758 0.0000560424 0.0000180417 0.0002987130 0.0000954536 -0.0001491370 -0.0002660074 0.0008070056 0.0003064794 -0.0004000840 0.0006870152 -0.0006379375 -0.0004774767 -0.0007556966 -0.0000125509 0.0004469265 0.0006595932 0.0005245419 -0.0003116205 -0.0085261973 0.0018628334 0.0049018928 0.0060734818 0.0072580395 -0.0028358052 -0.0002828652 -0.0001009091 0.0001451488 0.0002487728 -0.0004079374 -0.0001449272 -0.0035953907 0.0007044482 0.0026412434 0.0012255232 -0.0048697904 -0.0014955903 0.0003951730 0.0001034854 0.0002060913 0.0001588828 -0.0002378734 0.0000908268 -0.0000022875 0.0001587976 0.0000015865 0.0000752902 0.0000859044 0.0000199030 -0.0007998574 0.0002534077 -0.0007711959 0.0005950276 0.0010040229 0.0004054757 -0.0003238439 0.0001889451 -0.0001928349 0.0002290425 -0.0003236191 0.0001446557 -0.0038049101 0.0005389569 -0.0021585689 0.0016714180 -0.0041970895 0.0012173492 -0.0016905684 0.0027332112 -0.0019857104 0.0047783510 -0.0049950064 0.0014296727 -0.0059337845 -0.0101125038 -0.0125827449 0.0027691438 -0.0017187374 0.0090743848 -0.0026451011 0.0013723873 -0.0011164773 0.0141661621 0.0029518833 -0.0029849799 0.0013299987 -0.0073418567 0.0017260456 -0.0040712725 -0.0041350221 0.0053841454 0.0112026529 -0.0153693329 -0.0084925585 -0.1427004697 0.0255324097 0.0741097497 -0.0236083216 0.0009031430 0.0112115132 -0.0233632369 -0.0251974882 0.0133930526 -0.0136523914 -0.0102779763 0.0034483105 -0.0093925760 0.0152553049 -0.0023842183 -0.0126041421 0.0309724151 -0.0128703907 -0.0223218770 0.0059181264 -0.0100775968 0.0151191871 0.0106971044 0.0088220504 -0.1429842033 0.0219415173 -0.0764547364 0.0027147210 -0.0025228679 0.0007381467 0.0040308315 0.0011352723 -0.0012162996 0.0000492167 0.0001115336 0.0001047078 -0.0003595404 0.0003670974 0.0001071960 -0.0006210747 -0.0005034865 -0.0004078201 -0.0003367157 0.0015923361 -0.0005392225 -0.0069798685 -0.0054829954 0.0037068332 -0.0006000669 -0.0005374874 0.0002937097 0.0003913349 0.0001439534 -0.0003032786 -0.0001010491 0.0001845105 0.0004338287 0.0002675902 -0.0002660740 -0.0007855382 -0.0000635132 0.0003691329 0.0004103537 0.0000502565 -0.0001080657 -0.0002319046 0.0022983332 0.0054164731 0.0040327337 0.0040163926 -0.0026378505 -0.0109531010 0.0028686045 0.0035815102 0.0036298119 0.0001483056 -0.0000017534 0.0001635349 -0.0001132678 -0.0001117874 0.0000096420 -0.0005714023 0.0006648105 -0.0000326842 0.0000003870 0.0000235003 0.0000949061 0.0003882498 0.0003071551 -0.0000317143 -0.0000450484 -0.0000567932 -0.0000583341 -0.0000483707 -0.0000710738 -0.0000472978 -0.0001631322 -0.0000596804 0.0003002086 -0.0000990786 -0.0001206805 -0.0002271992 -0.0002356232 -0.0000447231 0.0003110709 -0.0008824325 -0.0009419272 -0.0015044533 -0.0017081894 -0.0002734365 0.0040750510 -0.0012766539 -0.0014887178 -0.0023656104 0.0044577674 0.0026462132 -0.0006865843 0.0000496128 0.0000451291 0.0000787502 -0.0008825510 -0.0002721434 0.0003267789 0.0290693377 -0.0233490764 0.0112283041 -0.0000073019 -0.0000569839 0.0000210563 -0.0000508962 -0.0000021839 0.0000450716 -0.0000023606 0.0000074871 -0.0000107420 -0.0000010129 -0.0000282830 0.0000124613 -0.0000113843 0.0000011502 0.0000004706 0.0000412080 0.0000430140 -0.0000030274 0.0000131682 0.0000030730 -0.0000225536 0.0000174358 0.0000285529 -0.0000078974 0.0000017608 -0.0000408371 0.0000064497 -0.0000028909 0.0001481581 -0.0000633194 0.0000857585 0.0000078644 -0.0001299594 -0.0000003677 -0.0000985970 0.0000316293 -0.0000757178 0.0000499522 -0.0001354289 -0.0002923536 -0.0000058079 -0.0000245017 0.0002879459 -0.0000798313 -0.0000662171 -0.0000976255 0.0000080950 0.0000751067 -0.0000382079 0.0000308508 0.0000994639 -0.0000389481 0.0000266466 -0.0000038481 0.0001637770 -0.0000263043 -0.0001733585 0.0000405456 0.0001043341 -0.0000015785 -0.0000804694 0.0000782472 0.0000364827 0.0345177158 0.0140175509 -0.0128272958 0.0065130972 -0.0001547716 -0.0046215489 -0.0122231736 -0.0087524880 -0.0059244532 0.0019163494 0.0002899935 -0.0006429771 -0.0069330718 0.0028564115 0.0100710458 0.0012696878 0.0008498670 0.0043738489 -0.0203329119 -0.0216361342 -0.0112863757 -0.0478027462 -0.0056459559 0.0209191474 0.0001623194 -0.0000329113 0.0001566853 -0.0119596291 0.0000693482 0.0098978127 -0.0576358037 0.0067709222 0.0522249164 0.0058860466 -0.0006627742 0.0054504687 -0.0081240608 0.0101439662 0.0077736145 -0.0040340693 0.0027001370 -0.0002801222 -0.0089370018 0.0001282277 -0.0118912792 0.0034470528 -0.0029407637 -0.0062642485 -0.0237486462 0.0314030258 0.0194929434 -0.0226234588 0.0134502844 -0.0011372229 0.0011632884 -0.0006158039 0.0001695298 -0.0114765506 0.0023210819 -0.0123967118 -0.0517463318 0.0061677707 -0.0462166700 0.0001329401 0.0000863009 0.0002058956 0.0002382959 0.0000026555 -0.0004225903 0.0005378288 0.0000078165 0.0014589704 0.0009021220 -0.0008767445 -0.0013064747 0.0196358687 0.0176028308 -0.0078759205 0.0340707876 -0.0188997340 -0.0223421982 -0.0380359468 -0.0087171733 0.0207958557 0.0337630873 0.0247789796 -0.0164082200 -0.3891053726 0.0758988015 0.2293447414 0.3067259530 0.3625462717 -0.1407523030 -0.0041914270 -0.0196630644 0.0006440234 0.0044923452 -0.0110500945 -0.0025917849 -0.0840917136 -0.0020562300 0.0579322077 0.0234310483 -0.1029299346 -0.0309386833 0.0382373446 0.0060020744 0.0219543614 0.0130515607 -0.0221345863 0.0066821495 0.0026793958 0.0199756369 0.0004506779 0.0063980498 0.0078553252 0.0019386940 -0.0660535117 0.0288618444 -0.0498523943 0.0428492010 0.0716226337 0.0270970915 -0.0324231576 0.0201654985 -0.0192828171 0.0230281558 -0.0328783066 0.0146004515 -0.3779733618 0.0545786869 -0.2161818586 0.1672612606 -0.4199704420 0.1212582050 0.0000236569 0.0000325733 -0.0000083878 0.0000738868 0.0000263293 0.0001150629 -0.0001282598 -0.0001174827 -0.0000776902 -0.0000348578 -0.0000894834 0.0000663259 -0.0000017521 0.0000009836 -0.0000475359 0.0003753246 0.0001838794 0.0000460494 -0.0001846908 0.0000124090 0.0000501255 -0.0000009324 -0.0000431697 0.0000397568 0.0005244169 0.0001291479 -0.0002195982 -0.0046832616 0.0022305417 0.0023778261 -0.0001916058 0.0011002210 0.0002457969 0.0003561127 -0.0011544838 -0.0000677932 0.0002615118 -0.0035456355 -0.0007976282 0.0006721541 0.0019806390 0.0003100336 0.0001201792 0.0010573714 -0.0001792698 -0.0005510647 -0.0004133075 -0.0002674155 0.0004384127 -0.0000175171 0.0002843172 -0.0048119268 0.0000353730 -0.0024528512 -0.0000830461 -0.0005429501 -0.0005369287 -0.0005643069 0.0007134309 0.0004462952 -0.0001108416 -0.0051241348 -0.0035059978 -0.0035602668 0.0069710582 0.0037521521 0.0028661758 0.0038406718 0.0032201061 -0.0010340458 -0.0083574668 0.0074910696 0.0329472483 0.0256405159 -0.0174557496 0.0027329421 0.0022918550 -0.0014336564 -0.0019266141 -0.0021510797 -0.0006363264 0.0004889038 -0.0000750175 -0.0010196530 -0.0009756990 0.0020292490 0.0050105138 -0.0002523458 -0.0019990227 -0.0029418486 -0.0004114520 -0.0005914255 0.0004597487 -0.0078712321 -0.0181615799 -0.0134884403 -0.0234026063 0.0165481069 0.0613780268 -0.0086538628 -0.0271350329 -0.0167798067 0.0005720045 -0.0011957873 -0.0016957756 0.0005413690 0.0032719052 0.0001601423 0.0104203546 -0.0175653074 0.0080624799 0.0037776098 0.0008302977 0.0002289702 -0.0481923706 -0.0345793415 0.0045880082 0.0042712221 0.0039842752 -0.0013489268 0.0083989946 0.0096792388 0.0085476392 0.0127941232 -0.0005284894 -0.0415743574 0.0170221732 0.0200034940 0.0293313343 0.0511138750 0.0074123557 -0.1039500000 0.1028896937 0.1021589303 0.1764085572 0.2058645082 0.0151910342 -0.4933173620 0.1972716348 0.2135775084 0.3476232063 -0.5464383449 -0.3442151516 0.0910221320 0.0005209509 0.0006889277 -0.0004424965 0.0002165973 -0.0050573027 0.0001954243 0.0015596912 -0.0011895723 0.0004576864 -0.0014428125 0.0032864387 -0.0017195058 -0.0009623930 -0.0002702394 0.0006197515 0.0000625140 -0.0000710230 -0.0002442571 -0.0000686613 0.0000554217 -0.0000468602 0.0000244622 -0.0000055005 0.0000080171 0.0008380280 -0.0006246383 0.0005260415 -0.0001366031 -0.0000034270 0.0000695290 0.0002911354 0.0005351284 -0.0009149827 0.0006352494 -0.0009081449 0.0014667062 0.0000262081 -0.0001975588 0.0000621237 -0.0002090732 -0.0000078280 0.0003090767 -0.0000472112 0.0000344550 0.0001135255 -0.0007897898 0.0025765772 -0.0050637043 -0.0061436430 0.0027421610 0.0014849539 0.0011699329 -0.0007103381 -0.0021122783 0.0003691076 -0.0001163987 0.0000113047 0.0001671205 0.0000383553 -0.0006423246 0.0004423026 0.0001193899 0.0001292376 0.0036633748 -0.0014337991 -0.0082000696 -0.0056704588 0.0041077879 0.0053900279 -0.0014014710 0.0020948588 -0.0028501287 0.0024595511 0.0009579881 -0.0007387256 -0.0003150299 0.0000040399 0.0004671487 -0.0003600268 -0.0002533509 -0.0003723179 0.0020000244 0.0005056013 -0.0005436053 -0.0009154608 0.0000119534 0.0007056939 0.0002907731 -0.0001849105 -0.0003014922 -0.0057645676 -0.0025695297 -0.0011020198 -0.0028355943 -0.0008689597 0.0024434316 -0.0005034079 -0.0002948658 -0.0000078920 -0.0051982258 -0.0034060383 -0.0000866234 -0.0028116370 0.0008628799 0.0015203864 0.0002103894 0.0000146021 0.0003110063 -0.0004296395 0.0005336957 0.0004553418 -0.0000803701 0.0000551241 -0.0000315888 -0.0004077006 -0.0000556944 -0.0006055259 0.0001230320 -0.0001100990 -0.0002868557 -0.0022237039 0.0026333541 0.0014082046 -0.0004530249 0.0006435712 0.0004600411 -0.0000020148 0.0000025699 0.0000101452 0.0001037045 -0.0002721611 -0.0009293160 -0.0034368911 0.0005237310 -0.0028614040 -0.0000608842 -0.0000617444 0.0002055458 -0.0000933367 0.0002076730 0.0000209463 0.0000378074 0.0000055800 0.0001479979 0.0000516874 -0.0000624192 -0.0001229079 -0.0011964072 0.0002309717 0.0006886022 0.0001268022 0.0007278863 -0.0000320806 -0.0000364496 -0.0005102487 -0.0000147563 0.0000115249 -0.0000457034 -0.0000007989 0.0019637920 -0.0010444298 -0.0013330230 0.0002139414 0.0002524237 -0.0001702368 0.0006304825 -0.0010151300 -0.0004059772 -0.0005831679 0.0005991035 0.0003561223 0.0056383408 -0.0023686066 -0.0046801612 -0.0026198096 0.0091283211 0.0027397815 0.0004155633 -0.0002828061 0.0003116777 -0.0004195637 -0.0001768792 -0.0002565511 0.0004750667 0.0006358846 0.0002078901 -0.0002453932 -0.0000684052 -0.0001180009 0.0020081263 0.0005531149 0.0016619964 -0.0018801235 -0.0026855251 -0.0010794549 -0.0003944042 0.0005063633 -0.0002422403 0.0003390794 -0.0004306694 0.0002135803 -0.0041627413 0.0008967182 -0.0024523937 0.0024160433 -0.0059740383 0.0017114108 0.0004090855 -0.0016872117 0.0006672150 -0.0033271326 0.0018786727 -0.0027859287 0.0032272608 0.0050363547 0.0057657032 -0.0011433144 0.0015247248 -0.0052576698 0.0015848237 -0.0011679819 0.0008089324 -0.0151447126 -0.0050472725 0.0004915337 -0.0009708746 0.0027914193 -0.0000879264 0.0049164565 0.0040295067 -0.0024145760 0.0002351506 0.0158797763 0.0012398229 0.0618841183 -0.0090432098 -0.0379000914 0.0067451551 0.0001324364 -0.0025192735 0.0337377963 -0.0246594352 -0.0135874048 -0.0032435466 -0.0340969530 -0.0044346369 -0.0101602925 -0.0162521474 -0.0064295771 -0.0318178008 0.0014107464 -0.0116306023 -0.0088202019 -0.0000110647 -0.0031887087 0.0067915943 0.0140440928 0.0032373789 -0.0825107614 0.0114806606 -0.0495698149 0.0153498243 0.0055580529 0.0066523189 -0.0154636291 0.0143897801 0.0071060976 -0.0003761835 -0.0002949919 -0.0006296739 0.0006702015 -0.0013473427 0.0009209767 0.0000373536 0.0000456771 0.0017888647 -0.0007044750 0.0018425706 -0.0013343888 0.0026715212 0.0020780015 -0.0012179692 0.0001738758 0.0002347905 0.0000453754 -0.0002362310 0.0000216581 0.0004811507 0.0000890759 0.0000402283 -0.0001900649 -0.0001282176 -0.0000321563 0.0002467957 0.0000492988 -0.0000023652 -0.0002288795 -0.0001622120 -0.0003411457 0.0000022658 -0.0004435105 -0.0016471733 -0.0011458520 -0.0016255976 0.0009383761 0.0038440439 0.0000532863 -0.0023162604 -0.0008608497 -0.0000161512 -0.0002022302 -0.0001159233 0.0002597305 -0.0000430673 0.0001546955 -0.0003332316 0.0018789514 -0.0014283552 -0.0002437215 -0.0001141928 -0.0001267815 0.0006246918 0.0004684995 -0.0001972652 -0.0001002849 0.0000574397 0.0007143220 0.0000343057 -0.0001076610 -0.0001216899 0.0001702571 0.0001508102 0.0004522657 -0.0003791232 -0.0004857944 -0.0008492217 -0.0027750079 -0.0000606420 0.0065169275 -0.0000615089 0.0009069058 0.0002551519 -0.0018764862 0.0004535544 0.0044460146 -0.0051034102 -0.0057037047 -0.0093237272 0.0072786071 0.0043652094 -0.0012837886 0.0001702441 0.0002367057 -0.0002080802 -0.0005675268 -0.0016673556 0.0007242102 -0.0083172505 0.0036289244 0.0007385644 0.0001049203 -0.0000273256 0.0001442781 0.0000031301 0.0000642848 0.0000647152 -0.0000133078 -0.0000606381 -0.0000388761 -0.0000042326 -0.0000164962 -0.0000332473 0.0000085344 0.0000265664 -0.0000138488 -0.0001753413 0.0000611822 -0.0000282052 0.0000264511 0.0000109383 0.0000191837 0.0000316840 -0.0000325953 0.0000786390 -0.0000980524 0.0000839384 -0.0001421501 0.0000515182 -0.0001477997 0.0001280139 -0.0000138448 0.0000213262 -0.0000348770 -0.0000400461 -0.0000598722 0.0001494335 0.0000558904 -0.0001702947 0.0003645717 0.0009685742 -0.0001131075 -0.0000502852 0.0003486685 -0.0000856467 0.0002724555 -0.0000939659 0.0000329709 0.0000446366 0.0000780292 -0.0000690830 -0.0001150818 -0.0000809262 0.0000402543 0.0000340020 -0.0002286674 0.0001854297 0.0008084349 0.0006370449 -0.0003924885 -0.0006134898 0.0001110099 -0.0002117627 0.0003442082 0.0254843995 0.0074172036 -0.0053381477 0.0030669794 -0.0004664366 -0.0040922789 -0.0085515587 -0.0059996213 -0.0038215891 -0.0025531055 -0.0005916597 0.0008546041 -0.0066176332 0.0012252681 0.0078262274 0.0040136106 0.0029172693 0.0004626805 -0.0274952417 -0.0182822399 -0.0131232369 -0.0224933034 -0.0057005590 0.0067858816 0.0007619038 0.0001968704 -0.0002069840 -0.0254891904 -0.0092058050 0.0038238064 -0.0100675495 0.0008054049 0.0166154770 -0.0005017344 -0.0000551699 -0.0020471775 0.0021222798 -0.0024593421 -0.0016778298 0.0018862096 -0.0009533264 0.0007053400 0.0027035220 -0.0008614151 0.0025925542 -0.0016178747 0.0022985670 -0.0006816471 0.0111483997 -0.0112166027 -0.0075363550 0.0038748310 -0.0038439220 0.0000298752 -0.0003823709 0.0002572599 -0.0001118925 0.0104762208 -0.0078618790 -0.0003725447 -0.0071045487 -0.0001277197 -0.0007358032 0.0004027636 0.0000003335 -0.0009688379 0.0006656776 0.0002312844 0.0006243223 -0.0003230511 0.0000187905 -0.0006721943 -0.0002482832 0.0002571987 0.0004815444 -0.0405802533 0.0078109905 0.0225818100 0.0063365046 0.0317472716 -0.0007679297 0.0086614777 -0.0211410861 -0.0067698823 -0.0186473983 -0.0131121488 0.0098406893 0.2346863026 -0.0785501483 -0.1451673764 -0.1491482856 -0.1735936208 0.0668757155 0.0270854569 -0.0369011979 -0.0153647720 -0.0280462238 0.0343313201 0.0175363420 0.2731601713 -0.1022024241 -0.2152982814 -0.1400786985 0.5015474097 0.1448743339 0.0119471739 0.0287321018 0.0057091129 0.0342922012 -0.0057969011 0.0177161533 -0.0269547416 -0.0168240642 -0.0103572020 0.0275600294 0.0180071980 0.0126792549 -0.2144941368 -0.0008368255 -0.1612980444 0.2176594435 0.3204707686 0.1155560844 -0.0187535040 -0.0115235772 -0.0093926287 0.0146869105 -0.0193506139 0.0097600504 -0.2652368188 0.0107621566 -0.1532637387 0.0942385605 -0.2311696975 0.0662198926 -0.0000144918 0.0000114735 -0.0000667020 0.0000275043 -0.0000447080 -0.0000183063 -0.0002167091 -0.0002873458 -0.0002740774 -0.0000650875 -0.0001082807 -0.0000050685 -0.0000732591 -0.0000223284 -0.0000405931 0.0003635401 -0.0000147512 -0.0001379490 -0.0001925132 -0.0001567977 0.0001229800 0.0000077264 -0.0000077672 0.0000936063 0.0000085456 0.0000132340 -0.0000006176 0.0000087940 -0.0000449035 -0.0000122255 0.0000228566 -0.0000430077 -0.0000230239 0.0000026495 0.0000897942 0.0000082580 0.0000556869 0.0000944642 -0.0000143495 -0.0000122689 -0.0001936481 -0.0000058517 -0.0001182074 -0.0000991104 -0.0000387705 0.0000196215 0.0000361060 0.0000193880 0.0000090499 0.0000277328 -0.0000082753 -0.0000322915 0.0000583711 -0.0000709068 -0.0000089034 0.0000157193 0.0000465018 -0.0000529519 0.0000290912 -0.0000235401 0.0002910639 0.0000781067 0.0000884194 -0.0001583795 0.0001764925 0.0001151991 -0.0003614589 -0.0003875964 -0.0003132221 0.0012180905 -0.0000683635 -0.0009501030 0.0036843137 0.0030229656 -0.0018348390 0.0002548921 0.0003140336 0.0000197616 -0.0003774810 -0.0003998603 0.0000362998 0.0001877747 0.0001233573 -0.0002047771 -0.0000453973 0.0003348249 0.0006790958 -0.0000040098 -0.0003376541 -0.0006783088 -0.0002050496 -0.0002032388 0.0001485043 -0.0008531265 -0.0022653682 -0.0018109333 -0.0036075158 0.0026551146 0.0095335895 -0.0013320165 -0.0050257958 -0.0030916756 0.0010037438 -0.0000264450 -0.0004522068 -0.0004806296 -0.0007732977 0.0004714214 -0.0021838546 0.0024248495 -0.0008489003 -0.0010376965 -0.0002219457 0.0003479652 0.0002763055 0.0001905245 -0.0003162737 0.0007806100 -0.0002949650 0.0000675420 0.0001812395 0.0005257228 0.0010686868 0.0001230589 -0.0001273337 -0.0004109516 0.0000087652 -0.0004106547 -0.0004260309 -0.0021213641 -0.0000780165 0.0054516274 0.0005575233 0.0002345219 0.0013741270 -0.0023528791 0.0000213238 0.0046898049 -0.0069403973 -0.0043842675 -0.0103979838 0.0114266679 0.0071531011 -0.0022259502 0.0001664398 0.0001241513 -0.0000259131 -0.0003364817 0.0007430862 -0.0000914033 -0.0001564255 0.0001132654 -0.0000386617 -0.0008094871 0.0009323184 0.0028481753 -0.0036265075 -0.0016914155 0.0044379250 0.0003914941 0.0030034824 -0.0021699277 -0.0000955771 -0.0003575905 -0.0002101927 -0.0000036026 -0.0001670099 0.0001691453 -0.0001225536 0.0000477160 0.0001313423 0.0000319929 0.0006493842 -0.0001930362 -0.0242383243 0.0406172468 -0.0401933818 0.0582699596 -0.0904863935 0.0855356155 -0.0001188890 0.0001285024 -0.0001268771 -0.0002483248 -0.0001460777 -0.0003013573 0.0000350043 0.0005643597 -0.0004750996 -0.0002777554 -0.0000427131 -0.0000190525 0.0006393270 -0.0001954954 0.0000668369 0.0003578902 -0.0000990230 -0.0000801562 0.0058184059 -0.0017148891 0.0039348869 -0.0002594761 -0.0049285086 0.0006444743 -0.0054391281 0.0013105669 0.0002021913 0.2541078939 -0.1352097130 -0.6142765358 -0.3776615849 0.3528455131 0.3871795760 -0.1597025947 0.2100170664 -0.1713933955 -0.0001161885 -0.0000483604 0.0000501862 -0.0000038707 0.0000047199 -0.0000104933 0.0000046537 0.0000239509 -0.0000060107 -0.0000191262 -0.0000055756 0.0000191581 0.0000451493 0.0000131957 -0.0000322045 -0.0000177353 -0.0000122945 -0.0000117101 0.0002762996 0.0001130531 0.0000810600 0.0001677400 -0.0002445248 0.0000983582 -0.0000039371 -0.0000123624 -0.0000261825 0.0003243605 0.0000360980 0.0000850854 -0.0000164504 -0.0000234324 -0.0000103730 -0.0000175672 0.0000126199 0.0000106991 0.0000425386 -0.0000374614 -0.0000105631 -0.0000816670 0.0000474728 -0.0000145277 0.0000341637 -0.0000220503 0.0000273687 -0.0000036771 -0.0000033630 -0.0000135745 0.0001335450 -0.0001049931 -0.0000614943 0.0003934291 -0.0001173942 0.0002524594 0.0000065879 0.0000157753 0.0000233989 0.0003579420 -0.0002163623 -0.0001238254 0.0001126015 -0.0000659347 0.0001114350 0.0000023262 0.0000109283 0.0000183357 0.0000031677 0.0000156646 -0.0000071493 0.0000032415 0.0000035053 0.0000342177 0.0000114339 -0.0000283196 -0.0000446127 0.0000522098 -0.0000333597 -0.0000325579 -0.0000385824 0.0000199590 0.0000218897 0.0000355715 0.0000235090 -0.0000199699 -0.0000328507 -0.0000076665 0.0000167299 0.0002107229 -0.0000152499 -0.0001422687 -0.0003269803 -0.0003510763 0.0001199165 -0.0000259393 0.0000482113 0.0000218223 0.0000219402 -0.0000152898 -0.0000139339 -0.0001227724 0.0000779159 0.0001132676 0.0000611795 -0.0002376113 -0.0001016781 -0.0000220520 0.0000876752 -0.0000238195 0.0001539185 -0.0000037277 0.0000788795 -0.0001363343 -0.0000985492 -0.0000538525 0.0001156057 0.0000507457 0.0000536500 -0.0007398591 -0.0000518554 -0.0006862054 0.0008428934 0.0011911495 0.0004329600 -0.0000196893 -0.0000685325 -0.0000049908 0.0000121326 -0.0000267810 0.0000088195 -0.0004516028 -0.0000338881 -0.0002830819 0.0000682878 -0.0001353789 0.0000132057 0.0003068244 -0.0000583863 -0.0020566093 -0.0008863819 0.0026717427 0.0017979276 -0.0040199423 -0.0023255509 -0.0021675295 -0.0015496436 -0.0023873828 -0.0016399935 0.0017522116 -0.0018389382 -0.0010160701 -0.0042273207 0.0021812695 0.0040843402 -0.0062027590 0.0027048335 0.0009435947 0.0075160027 0.0046672010 -0.0020132071 0.0055522433 0.0027613345 -0.0043437467 -0.0423179439 0.0220198212 0.0177398782 -0.0029774710 0.0106635666 0.0033480648 0.0138327122 -0.0507274990 -0.0124363705 -0.0290163062 -0.0554401342 0.0065078201 -0.0072089380 0.0712674503 -0.0022975736 0.0419072497 0.0460640766 0.0167114265 -0.0049990933 -0.0087548366 -0.0037023395 0.0028028241 -0.0094199681 0.0040795608 -0.0268615281 -0.0103572380 -0.0030518031 -0.0208397491 -0.0131446803 -0.0050949731 -0.0103973952 0.0149860327 0.0021224582 -0.0024370853 -0.0005172508 -0.0006540335 0.0035924722 -0.0050105599 -0.0033910048 0.0054223952 0.0061578330 0.0048708147 0.0011773324 -0.0010063646 -0.0003496867 0.0020309076 0.0017290865 -0.0011489548 0.0002897824 0.0002339388 -0.0001122065 -0.0000658456 -0.0001489774 0.0002303815 -0.0000322688 -0.0001496999 -0.0001948312 0.0000114868 -0.0000000447 0.0000997585 -0.0000617811 0.0001723966 0.0000126259 -0.0001635684 0.0000401489 0.0001582402 -0.0010807120 -0.0023813449 -0.0017352140 -0.0006999774 0.0004836589 0.0008456333 0.0020350398 -0.0003825321 0.0015343334 0.0000213440 -0.0003366388 -0.0003043231 -0.0003432904 0.0001867090 0.0000461548 -0.0017157148 0.0009773290 0.0025961540 -0.0002793676 -0.0002172852 -0.0002524434 0.0012598675 0.0008545626 -0.0007884157 -0.0005749764 0.0000509124 0.0021161362 0.0002307084 0.0000347726 0.0005297750 0.0003926686 0.0003360406 0.0004062310 -0.0010450919 -0.0013286512 -0.0022348872 -0.0084182081 -0.0005894809 0.0195811118 0.0030026256 0.0059247787 0.0068895903 0.0002023004 0.0004629280 0.0006956077 -0.0123957982 -0.0139611207 -0.0226602632 0.0141560163 0.0081448460 -0.0028145885 -0.0002502654 -0.0002467371 -0.0004441295 0.0025279342 0.0011377133 -0.0006908080 0.0586678234 -0.0426824910 0.0172261241 0.0001551532 -0.0003417870 -0.0003823703 0.0005059631 0.0001066276 -0.0002767912 0.0000106294 0.0001215948 0.0001283657 -0.0000891624 -0.0000067301 -0.0000014088 0.0000542995 0.0000041926 -0.0000834185 -0.0003612504 0.0001650949 -0.0000009660 0.0000407273 0.0000274348 0.0001104702 -0.0003969180 0.0001509154 0.0002425859 0.0000379699 -0.0005054028 -0.0001352272 0.0000661726 0.0002224921 -0.0001485551 0.0000896566 -0.0000366566 0.0005184095 -0.0001481668 -0.0003695937 0.0005349468 0.0004550065 0.0003753495 0.0003605929 0.0014443590 -0.0004281188 -0.0001336906 0.0015916363 -0.0004822602 0.0000493267 0.0001816263 0.0000723759 -0.0002892834 0.0002999410 -0.0002899912 -0.0005177819 0.0000643530 -0.0003557810 -0.0001345765 0.0012510509 -0.0002606996 -0.0011583528 -0.0001969244 0.0011737912 0.0002345041 -0.0012229405 0.0011099507 0.0009717862 0.0595711327 0.0213507742 -0.0197535260 0.0093221522 0.0000715732 -0.0068662163 -0.0196551386 -0.0141009453 -0.0096211809 -0.0007108899 -0.0005008561 -0.0001633817 -0.0133143591 0.0042719645 0.0183149764 0.0062151175 0.0040266046 0.0043132682 -0.0554381772 -0.0401010088 -0.0252231419 -0.0612427920 -0.0117563425 0.0218327779 0.0009514765 0.0002086262 -0.0001795688 -0.0420291583 -0.0114995792 0.0129047118 -0.0663194270 0.0075809298 0.0682558744 0.0091341631 -0.0019425767 0.0083991831 -0.0154739051 0.0188686465 0.0143510391 -0.0048471516 0.0031225231 -0.0006028862 -0.0174304399 0.0014119505 -0.0221835722 0.0080605144 -0.0074535064 -0.0061385857 -0.0613552616 0.0675962830 0.0414844736 -0.0441841050 0.0282652692 -0.0062812328 0.0016539778 -0.0009207771 0.0003401342 -0.0434313692 0.0245555120 -0.0138405019 -0.0699097611 0.0123674906 -0.0700380530 0.0004715564 0.0000931800 -0.0004807553 0.0008327869 0.0002148067 0.0000981721 0.0009148060 -0.0001943369 0.0015530155 0.0011782036 -0.0010252328 -0.0012125587 -0.0320209804 0.0090820395 0.0190234805 0.0269409258 0.0082295418 -0.0153055618 -0.0125249409 -0.0152413814 0.0057322196 0.0007374697 0.0003048801 0.0000089668 0.0008393414 -0.0206530948 -0.0048158358 0.0284735282 0.0354594486 -0.0137298317 0.0278490811 -0.0437715185 -0.0203160371 -0.0292957313 0.0255768909 0.0183195197 0.2385245125 -0.1008426150 -0.1924415788 -0.1290311836 0.4350089561 0.1286534439 0.0202108029 -0.0301228235 0.0155709120 -0.0480890501 0.0014630198 -0.0265931254 0.0535079427 0.0413408075 0.0239220029 -0.0470030818 -0.0192349352 -0.0232089470 0.3221918032 0.0204598567 0.2537474083 -0.3419921128 -0.4857495138 -0.1815756261 -0.0011948370 0.0250884156 -0.0025110600 -0.0037193959 0.0043714146 -0.0028244887 0.0935464063 0.0187366303 0.0555241866 -0.0060060383 0.0084348372 -0.0026154245 -0.0000469125 0.0001334345 0.0001315848 0.0001908346 -0.0001936153 0.0001152230 0.0003398648 0.0001971397 0.0000040083 0.0004915366 0.0003604630 0.0005945113 -0.0003086343 0.0001668222 0.0000487217 0.0001150889 -0.0001712009 -0.0003606126 0.0012054594 -0.0008818456 -0.0002037211 0.0000150792 -0.0000290400 0.0009496767 -0.0001656772 0.0006011742 0.0001156172 0.0059018470 -0.0030002796 -0.0032464772 0.0001320449 -0.0016225593 -0.0002748620 0.0001523050 -0.0020174646 -0.0003977715 -0.0030138905 0.0033501760 0.0021623148 -0.0018908022 0.0006742877 -0.0007741775 0.0008335916 0.0013135991 0.0005878594 -0.0000447311 0.0000274114 -0.0000710030 -0.0001705123 -0.0001286360 0.0000128961 0.0024464151 -0.0003396369 0.0017610828 0.0001318291 0.0004657196 0.0005254486 0.0012312399 -0.0011606095 -0.0005756840 -0.0017135199 0.0105930089 0.0069513841 0.0084392733 -0.0157492666 -0.0092372523 -0.0042988711 -0.0059694074 -0.0047648083 0.0101816480 -0.0085452947 -0.0189270644 -0.0026797495 -0.0028813594 -0.0001659976 0.0000248431 -0.0008809898 -0.0013768439 0.0015118893 0.0005966125 0.0000983146 -0.0006660426 -0.0008480984 0.0000822244 -0.0003562488 -0.0013009510 -0.0017209904 0.0001792150 0.0020821389 0.0036797980 0.0011506840 0.0021067795 -0.0001539698 -0.0011562326 -0.0015874879 -0.0005884099 0.0107142468 -0.0086996267 -0.0286871519 0.0027835651 0.0221752376 0.0117100588 -0.0032463436 0.0009015424 0.0016694180 -0.0048335305 -0.0034800003 -0.0024965358 0.0221492835 -0.0313259067 -0.0368049544 -0.0009746980 0.0037804435 0.0167856722 -0.0058782570 -0.0011570048 0.0153781602 0.0225025317 0.0049607102 -0.0521057516 -0.0167121289 -0.0221413825 -0.0287651836 -0.0193980631 -0.0055671301 0.0275063467 0.0226852303 0.0251575491 0.0351760197 0.2253948814 0.0210321682 -0.4992092049 -0.2194675003 -0.2228193988 -0.3877066307 -0.1601338554 -0.0252150655 0.3697705879 0.2225149409 0.2475534357 0.3946796394 -0.0457463563 -0.0230765558 0.0215244555 -0.0014428042 -0.0019151865 0.0005880386 0.0046157136 0.0114997062 -0.0028916654 0.0009878127 -0.0007097852 0.0003970203 -0.0044670966 0.0016046927 0.0024495748 -0.0044005377 0.0001899806 0.0038278616 0.0004647801 -0.0005193825 -0.0010797087 -0.0002598936 -0.0002687606 -0.0002877011 0.0001645933 0.0000457826 0.0003683511 -0.0006534124 0.0012467095 -0.0004188107 0.0003343352 0.0001430096 0.0001314707 0.0031842118 -0.0014237684 -0.0044205916 0.0016109280 0.0038871269 0.0043933557 -0.0004423608 0.0005841975 -0.0005228986 0.0002530946 0.0001693991 -0.0024335907 0.0002336319 -0.0002853882 0.0003032205 0.0007708531 -0.0056874762 0.0087236273 0.0099949587 -0.0069342696 -0.0028627420 -0.0038126027 0.0021521693 0.0013748164 -0.0011702875 0.0003947462 0.0004696507 0.0005120447 -0.0004558457 -0.0003880590 -0.0007581388 -0.0001221144 -0.0000769567 -0.0094467738 -0.0012140315 -0.0064164772 -0.0119264786 -0.0057355186 0.0107721998 0.0112206733 -0.0079989061 -0.0171639263 -0.0005405138 -0.0002112974 0.0001719324 0.0002679794 -0.0000082958 -0.0002468709 0.0000230901 -0.0000250162 0.0001963892 -0.0012894739 -0.0002725019 0.0005905747 -0.0002911282 -0.0002711071 0.0000517327 0.0003949745 0.0004078536 -0.0002023848 0.0049612444 0.0025599596 0.0009236088 -0.0009035616 0.0011766119 -0.0001344266 0.0004610866 0.0003192706 0.0007949520 -0.0032606719 -0.0007737331 -0.0012086693 0.0054879927 -0.0016040644 -0.0027112736 0.0014183008 -0.0008655574 0.0003292780 -0.0011035914 0.0008163676 -0.0001772549 -0.0025183378 0.0015080666 -0.0004259590 -0.0010129168 0.0006930781 -0.0004551113 0.0011853447 -0.0009051982 0.0001870625 0.0089104092 -0.0081719743 -0.0025921425 -0.0071010781 0.0025081780 -0.0048239497 0.0004502149 -0.0002713975 0.0001385425 -0.0064356055 0.0047904035 0.0018124295 0.0092350748 -0.0031884869 0.0063071942 0.0000663818 -0.0000013403 -0.0010599347 -0.0000759705 -0.0000953255 0.0002472164 0.0002156845 0.0000156852 0.0004689166 0.0003017388 -0.0002807935 -0.0004326609 0.0000215487 0.0000041430 0.0000034596 0.0019423282 -0.0006486564 -0.0011888770 -0.0008865471 -0.0001864386 0.0004849039 -0.0002300498 0.0001546800 0.0001684210 -0.0027573181 0.0002009634 0.0015148116 -0.0005071052 -0.0001495862 0.0002839610 0.0013337548 -0.0016883832 -0.0008865611 -0.0014270936 0.0010983176 0.0008929498 0.0114516405 -0.0044120132 -0.0089748123 -0.0065771293 0.0219409201 0.0063365286 0.0010724804 -0.0000090855 0.0006630972 -0.0009794344 0.0000797640 -0.0005342059 0.0013927918 0.0007429471 0.0007059281 -0.0011743213 -0.0002165559 -0.0006216524 0.0065824836 0.0003584611 0.0052134933 -0.0074307008 -0.0100168307 -0.0038700568 -0.0003494278 0.0003544373 -0.0002337447 0.0000537897 -0.0000388664 0.0000253496 -0.0007298744 0.0004733653 -0.0002888865 0.0011105180 -0.0029154168 0.0008309261 0.0025134090 -0.0007886266 -0.0010613029 -0.0004930601 0.0064004638 0.0052092599 -0.0048082501 0.0005805907 0.0041009042 -0.0055607316 -0.0048014941 -0.0069269661 0.0012483405 -0.0019926098 -0.0018604526 0.0111484128 0.0136364455 0.0109959077 -0.0059492533 0.0054572125 -0.0020041610 0.0051072281 0.0028712661 -0.0036156857 -0.0002589023 0.0015400651 0.0004272119 0.0132959588 -0.0044318676 -0.0076754073 0.0002435119 -0.0015549674 -0.0002944267 0.0004863435 0.0008722762 -0.0000986093 0.0010408758 0.0036267159 -0.0000351336 0.0011969678 -0.0019166636 0.0015957060 -0.0005672574 -0.0055386086 -0.0002171888 0.0001668229 -0.0008238847 0.0003611813 -0.0004187587 0.0056547385 -0.0022698644 -0.0167676700 0.0020748791 -0.0210086161 0.0007567246 0.0000160504 -0.0008330166 0.0008861626 -0.0009701808 -0.0002395842 -0.0025146171 -0.0009450025 -0.0002668502 0.0011912545 -0.0013299530 -0.0008548509 0.0024611700 0.0025687944 0.0021528040 0.0000045737 0.0019497021 -0.0016655433 0.0011659732 0.0011041753 -0.0004175376 -0.0000513662 0.0000955819 0.0002147534 -0.0000899096 -0.0003849076 -0.0004934191 -0.0001247422 0.0001191149 0.0004262707 0.0000542830 0.0001126042 0.0001060110 0.0000830346 -0.0000396699 -0.0001382395 -0.0002990983 -0.0009473479 -0.0006181058 0.0006388536 0.0024471161 0.0018360481 -0.0007571837 0.0006740219 0.0021341007 -0.0004389574 -0.0006279653 -0.0007404285 0.0003846231 0.0000469790 0.0001598773 -0.0007518986 -0.0003611069 0.0001272455 0.0002474105 0.0003295016 -0.0043910425 -0.0004291189 0.0001166078 0.0014078879 -0.0000707441 0.0000489920 0.0005032210 0.0008548907 0.0003013144 -0.0013787583 -0.0003825149 -0.0006009599 -0.0007953871 -0.0005634622 -0.0002486764 0.0006957009 0.0007911948 0.0007333897 0.0006458320 0.0072663951 0.0009554968 -0.0155759644 -0.0064920537 -0.0063263139 -0.0113963340 -0.0053671863 -0.0004051770 0.0114335412 0.0051152022 0.0056057021 0.0084108978 0.0002308185 0.0004222249 0.0003886141 0.0004565076 0.0003457356 -0.0001907451 -0.0044872861 -0.0002015243 0.0011341772 0.0000539454 -0.0017190483 0.0009707516 -0.0001012169 0.0008623362 0.0010737177 -0.0007306612 0.0002454019 0.0009223534 0.0000442847 -0.0002856821 -0.0004841256 -0.0002785037 -0.0002935742 0.0001696374 0.0000275587 0.0002640259 -0.0002951542 0.0015633933 0.0006575168 0.0007961194 0.0000288123 0.0002183965 -0.0000843419 0.0005022641 -0.0003212242 -0.0007029039 0.0002400033 0.0007545658 0.0006310821 0.0014064743 0.0014076576 0.0009927541 0.0021658087 0.0001457701 -0.0017304180 -0.0008485461 -0.0012381249 0.0024072641 -0.0030429478 -0.0027526333 -0.0023009418 -0.0073686223 -0.0071872637 -0.0020098327 -0.0045564565 0.0024868253 -0.0057021362 -0.0000618559 0.0001585147 0.0000826254 -0.0000299403 -0.0005238558 0.0000767855 0.0004264381 -0.0009365368 -0.0007133577 -0.0021994083 -0.0000483983 0.0002811049 -0.0016699854 -0.0010370381 0.0015023566 0.0020394975 -0.0015182483 -0.0030485031 -0.0027377950 -0.0011670102 0.0011101767 0.0018012004 0.0005323750 -0.0006065797 -0.0008798433 0.0001160037 0.0012995504 -0.0049097724 -0.0011956729 0.0014014767 -0.0010447370 -0.0009454629 -0.0005555505 0.0020776548 0.0006940473 -0.0009415927 0.0235970887 0.0133764439 0.0045262181 -0.0074985896 0.0011213312 0.0061096208 0.0006910065 0.0001701556 -0.0001737488 -0.0099745721 -0.0056169684 -0.0029327713 0.0218943030 0.0001180002 -0.0175398881 -0.0588646460 0.0363245788 -0.0164468085 0.0411288434 -0.0273424421 0.0145994028 0.1273896229 -0.0751038646 0.0262691404 0.0394051979 -0.0305948036 0.0076626011 -0.0551374794 0.0407092672 -0.0124558852 -0.4526854345 0.4077891291 0.1413415352 0.2528958912 -0.0828833997 0.1730764579 -0.0153996551 0.0086744445 -0.0041323461 0.2274332559 -0.1891473759 -0.0684576254 -0.4739736432 0.1660149045 -0.3401980840 0.0003056844 -0.0000663257 -0.0012606004 0.0007393606 0.0002993827 0.0009839733 -0.0135893520 -0.0011392728 -0.0384973943 -0.0173843681 0.0189366515 0.0330188840 -0.0010641122 0.0013760836 0.0007086321 -0.0023308268 0.0012086271 0.0014675520 0.0006308206 -0.0011265985 -0.0004645926 -0.0000727475 -0.0002617395 0.0000275064 0.0047016915 -0.0022947788 -0.0031068099 0.0023950326 0.0026960867 -0.0011389043 -0.0002755290 0.0006743269 0.0002171909 0.0010285734 -0.0002361651 -0.0006139525 -0.0040494498 0.0017558297 0.0039291920 0.0040023945 -0.0121373696 -0.0037573639 0.0015070826 -0.0023468238 0.0009756725 0.0067779461 -0.0014122898 0.0036470496 -0.0036802076 0.0004345568 -0.0020173853 0.0010942335 0.0006442666 0.0004744827 -0.0148595552 0.0014697760 -0.0110836604 0.0026280079 0.0036138724 0.0020430525 0.0010368768 -0.0017127256 0.0007885429 -0.0022099322 0.0003994069 -0.0012782405 0.0128391515 -0.0032657499 0.0066538757 -0.0145310422 0.0330336443 -0.0100992924 0.0001893859 -0.0003480131 -0.0004810309 -0.0004845252 0.0005029132 -0.0004443853 -0.0011952094 -0.0002951203 0.0002391476 -0.0013859188 -0.0012636951 -0.0015550845 0.0003839039 -0.0002769342 -0.0006231781 -0.0005504162 0.0017139655 0.0014688239 -0.0027295210 0.0001739094 0.0008886076 0.0005409859 -0.0009363298 0.0008965088 -0.0018376123 -0.0065253704 0.0012503878 -0.0452990619 0.0081017402 0.0392350214 0.0006030224 -0.0007212327 -0.0006713514 0.0000443103 0.0059518185 0.0008141367 0.0014401925 0.0018449948 -0.0013106359 0.0001302981 -0.0039837482 0.0000635267 0.0003964858 -0.0012554465 -0.0000013995 0.0007303357 0.0014167443 0.0003779062 -0.0007768071 -0.0010824953 -0.0006445237 0.0138008582 -0.0000621384 0.0063674101 0.0011115165 0.0005818961 0.0003275198 0.0012136530 0.0002056807 0.0001886679 -0.0025916648 -0.0002500618 -0.0012259020 0.0012286002 -0.0014967017 -0.0008669478 0.0027866164 0.0027499420 0.0028036977 0.0013946449 -0.0042650524 0.0007360026 -0.0038525826 -0.0031396094 0.0023685586 -0.0002425789 0.0000035098 0.0002082635 -0.0002023543 0.0005388358 0.0005578764 0.0002190291 0.0000601007 -0.0004301541 0.0000349644 0.0004698858 -0.0003040270 0.0004199599 -0.0006211905 -0.0004749796 0.0003096086 0.0013328870 0.0010310585 -0.0009479090 -0.0029883402 -0.0023711244 0.0016482020 -0.0008324951 0.0013429659 -0.0050715678 0.0030171751 -0.0039759223 0.0004169371 -0.0003443829 -0.0009063756 -0.0005875236 -0.0005242192 0.0000859279 -0.0001054652 0.0009168995 -0.0039326670 -0.0004716652 0.0003614573 0.0010169261 0.0005380633 0.0004177007 0.0000310715 0.0004823967 -0.0005076998 -0.0004463855 -0.0004612730 -0.0001998866 -0.0002092274 -0.0009459513 -0.0000133269 0.0004906938 0.0002380152 0.0000502586 -0.0000401068 0.0026823157 0.0028916931 -0.0105884957 -0.0012753427 -0.0024979327 -0.0027202704 -0.0008694627 -0.0033154900 0.0066635793 0.0018257508 0.0027068155 0.0032435283 0.0050540524 0.0026933705 -0.0005852508 -0.0005835323 -0.0008212836 -0.0000612923 0.0023517859 0.0034439629 -0.0021209848 -0.0021744370 0.0017648917 -0.0010404754 -0.0002540747 0.0010174484 0.0005500848 -0.0009204887 0.0002035480 0.0009794661 0.0000520690 -0.0002493138 -0.0003798988 -0.0000684995 -0.0001428488 -0.0000051031 0.0000207485 0.0000624787 0.0000464683 -0.0000199961 0.0001525714 0.0000338585 0.0000680622 0.0000936808 -0.0000013173 0.0005157585 -0.0002633623 -0.0006380939 0.0002050679 0.0007004253 0.0005624823 0.0000253240 0.0003562071 -0.0000906237 0.0002491546 0.0000918288 -0.0008006263 -0.0000341917 -0.0002209809 0.0002782761 0.0000137662 0.0000053733 0.0000934410 -0.0000248706 -0.0006643904 -0.0002190234 0.0005802995 -0.0000290261 -0.0001423333 -0.0003417135 0.0001218095 0.0002353977 0.0000431089 -0.0001611517 0.0000330107 -0.0000382360 -0.0001808568 -0.0001543646 -0.0018140689 -0.0000009849 0.0001415812 -0.0011586820 -0.0010751829 0.0010982547 0.0019403792 -0.0014749439 -0.0028391848 -0.0015880865 0.0022087661 0.0034839634 -0.0643261719 -0.0183199732 0.0209355533 0.0499218630 0.0153884762 -0.0208799552 0.1318480421 0.0336486642 -0.0361242552 0.0440123949 0.0171741709 -0.0112913564 -0.0642195315 -0.0218403558 0.0186296100 -0.5584152181 -0.2980040664 -0.0945921252 0.2615563605 -0.0063800683 -0.1800022506 -0.0149998261 -0.0032312153 0.0054534115 0.2938382623 0.1531730358 0.0499995623 -0.4531141830 -0.0232515277 0.3501636568 -0.0029221145 0.0017346028 -0.0007448313 0.0023360004 -0.0018951476 -0.0000062674 0.0053469740 -0.0032005865 0.0010255748 0.0023253644 -0.0012337550 0.0013145804 -0.0026468661 0.0018692562 -0.0002527067 -0.0162379446 0.0141469465 0.0044093086 0.0115764126 -0.0044650368 0.0069101149 -0.0005131943 0.0002682118 -0.0001548013 0.0103696949 -0.0081879112 -0.0018001490 -0.0148588352 0.0061352159 -0.0100805408 -0.0092059979 0.0017664198 0.0383171690 -0.0240028953 -0.0100434714 -0.0308171997 -0.0006350616 -0.0000477950 -0.0018447546 -0.0008418484 0.0009340468 0.0015965814 0.0135549766 -0.0018997239 -0.0073345960 0.0051207944 0.0037512760 -0.0025794712 0.0010148782 0.0021899000 -0.0005530357 -0.0036817467 0.0019833719 0.0023025549 0.0071012455 0.0015833990 -0.0027560860 -0.0371712333 -0.0390078429 0.0173775585 -0.0046075495 -0.0011656547 0.0026442996 0.0004092609 -0.0009159847 -0.0002287840 -0.0104891551 0.0001295751 0.0068870610 -0.0039211107 0.0144670672 0.0029419936 -0.0024222940 -0.0006118923 -0.0012730657 -0.0011154612 -0.0011289032 -0.0005388596 -0.0007528040 -0.0004061456 -0.0003326238 0.0010694197 -0.0001464848 0.0005941430 -0.0048549785 -0.0001138571 -0.0046784011 0.0072392743 0.0095127733 0.0038758402 0.0010230265 0.0008425651 0.0005241441 -0.0001224185 0.0003417501 -0.0001062442 0.0065956909 0.0004568701 0.0038247501 0.0004039509 -0.0008606440 0.0002830748 0.0002910762 -0.0003961194 -0.0002354770 -0.0007079546 0.0009141992 -0.0002191661 -0.0006057732 -0.0001757205 0.0004046151 -0.0013551260 -0.0006479151 -0.0022251190 0.0002326142 -0.0005612690 -0.0003701410 -0.0013952931 0.0010152504 0.0014987478 -0.0018312570 0.0004454426 0.0002321173 0.0018426062 0.0009749473 -0.0000821321 0.0000283920 0.0000312388 -0.0000232229 0.0000336152 0.0000376737 -0.0000783109 -0.0000087753 0.0000367784 0.0000046047 0.0000072994 -0.0000888908 -0.0000218661 -0.0000348150 -0.0001723190 0.0000042033 -0.0003168231 -0.0001954731 -0.0001320543 -0.0000903768 0.0001743414 -0.0000593916 0.0000765555 0.0001741936 0.0000568943 0.0001575236 -0.0001303155 0.0000559693 -0.0012740577 0.0003683979 -0.0005855764 0.0000631548 0.0000640656 0.0000528899 -0.0002000818 0.0002013337 -0.0000811798 0.0005681586 0.0000501650 0.0003399205 -0.0003283841 0.0003515305 -0.0001532613 -0.0007236701 -0.0004925128 -0.0005936630 -0.0001954740 -0.0003380459 0.0008382256 -0.0008654381 -0.0007808511 0.0002495531 -0.0000665753 -0.0001874693 -0.0001708552 0.0007977500 -0.0005719033 -0.0016892088 -0.0004312793 0.0002750534 0.0006596930 0.0002083267 0.0004911101 0.0004629772 -0.0005639335 -0.0005169111 0.0000941423 0.0008584458 -0.0000898851 -0.0003969991 0.0020119708 0.0031879730 0.0036277690 -0.0005127445 0.0009767769 0.0022781668 -0.0018849094 -0.0032929350 -0.0017276134 0.0004772559 -0.0000874056 -0.0005809690 -0.0009635773 -0.0020195162 0.0003090407 0.0066513303 -0.0042324618 -0.0197017951 -0.0019563935 0.0014710017 0.0040922732 0.0002340493 -0.0000634852 -0.0014795119 0.0004971247 0.0000352830 0.0030759332 0.0013673287 0.0017805745 0.0032955469 -0.0000617696 -0.0007216108 -0.0026447445 0.0004236731 -0.0010173994 -0.0030840826 -0.0100173226 0.0046290177 0.0170916726 0.0116770042 0.0110195042 0.0208262738 0.0086104149 0.0004239930 -0.0242554665 -0.0154439141 -0.0129413937 -0.0281372412 0.0049853628 0.0022928615 -0.0023629950 -0.0003835650 -0.0001788856 -0.0000435014 -0.0046397540 0.0016238139 0.0006054468 -0.0001966838 0.0001586456 -0.0000949488 -0.0133096941 0.0223549238 0.0667216787 -0.0584869256 -0.0048804427 0.0373747342 0.0176555951 0.0115498042 -0.0032647633 -0.0002798319 -0.0020341866 0.0000355944 0.0003189568 -0.0005904141 0.0004375382 0.0017065721 0.0003097467 0.0001530259 -0.0006607431 -0.0003330303 0.0003004964 -0.0104266786 -0.0617078911 -0.0595548260 0.0826893949 0.1096868932 0.0571735878 -0.0024027291 0.0018792273 -0.0033326977 0.0007028751 -0.0004463770 -0.0030428025 0.0007710059 0.0009056658 -0.0017105518 -0.0021801609 -0.0022043774 -0.0032050206 -0.0067902153 0.0009714779 0.0002388394 -0.0032137601 0.0016762860 0.0015017034 0.0045240850 -0.0011542725 -0.0018113083 0.0001824412 0.0006941160 -0.0015620676 0.0018645974 -0.0006320420 0.0001460218 -0.4287793283 -0.0340753310 0.0947480569 -0.3316068255 -0.1744964719 0.2627338078 0.3584385391 -0.2460771065 -0.5436523306 0.0001408805 -0.0000021338 -0.0001027243 0.0004154264 0.0001745996 -0.0001033131 -0.0003719298 -0.0000774609 0.0001580337 -0.0006201977 -0.0001750206 0.0001213082 -0.0002382458 -0.0001162508 0.0000704891 0.0003310119 0.0000980372 -0.0000996430 0.0035508452 0.0017132264 0.0007180160 -0.0022674018 -0.0001367921 0.0018649101 0.0001210727 0.0000206180 -0.0001590758 -0.0022122838 -0.0009593799 -0.0005075344 0.0024779358 0.0001778620 -0.0019873808 0.0003175556 -0.0001981987 0.0000995002 -0.0002081319 0.0001442385 -0.0001112021 -0.0008578549 0.0004424111 -0.0002113193 -0.0003026345 0.0001550842 0.0000118863 0.0003497745 -0.0002947522 0.0001133380 0.0032182158 -0.0029189009 -0.0010711640 -0.0012642944 0.0004637147 -0.0009480176 0.0001616115 -0.0000238844 0.0000162550 -0.0012345630 0.0018697117 0.0002912540 0.0036773138 -0.0011378385 0.0025940424 0.0000283006 -0.0000220260 0.0000251342 0.0000991550 0.0000243915 0.0000544292 0.0000657992 -0.0000287497 0.0001553353 0.0000691494 -0.0000992706 -0.0001140843 -0.0001093911 0.0000037199 0.0000571964 0.0000549958 -0.0000488969 -0.0000429255 -0.0000284367 -0.0000014634 0.0000135528 0.0000248733 0.0000043280 -0.0000163435 -0.0001372159 0.0000190557 0.0000839849 0.0002962058 0.0003458516 -0.0001473570 0.0000871604 -0.0000628910 -0.0000592419 -0.0000681539 0.0000198361 0.0000370724 0.0003341965 -0.0001357960 -0.0003423189 -0.0002103784 0.0005938041 0.0001951084 0.0002113165 -0.0000719480 0.0001274124 0.0003361657 0.0000599485 0.0001607665 0.0001468734 0.0001211268 0.0000502058 -0.0001411259 -0.0000213189 -0.0000728303 0.0014523667 0.0000074204 0.0011715970 -0.0014699332 -0.0021282356 -0.0007824687 -0.0001350343 -0.0000396722 -0.0000708478 -0.0000986603 -0.0000672808 -0.0000518489 -0.0008353941 0.0000104174 -0.0005084653 -0.0003620539 0.0006575172 -0.0002817013 0.0144501793 -0.0027122741 -0.0313676601 0.0103318827 0.0354951532 0.0414725018 -0.0840536785 -0.0391585599 -0.0182397026 -0.0769742885 -0.0829943057 -0.0573978367 0.0087910522 -0.0132109283 -0.0362856539 0.0429785956 0.0774189337 0.0444778419 -0.1127771805 -0.0285352942 0.0420984355 0.0974741961 0.0403295217 0.0304372128 0.0011462650 -0.0004477829 -0.0004721643 -0.0150280018 0.0035804384 0.0074566595 -0.0000605012 0.0004192541 0.0000581463 -0.0006321303 0.0003571972 0.0003303183 0.0008799580 -0.0019668596 -0.0007540411 -0.0006982849 -0.0011976886 -0.0003609570 -0.0005049234 0.0002073127 -0.0004370752 0.0001886492 0.0007910100 0.0001592513 0.0002975615 -0.0002055085 0.0000869842 -0.0037925499 0.0014341815 -0.0020372131 -0.0001602158 0.0000150492 0.0003777129 -0.0010702747 0.0012589442 0.0001791763 0.0040810000 -0.0032014105 -0.0014009870 -0.0048765328 0.0083261600 0.0055658645 -0.0031487110 -0.0028102856 -0.0038249858 0.0122266628 0.0927494045 0.0921894924 -0.0279729877 -0.0156675462 0.0213076687 -0.0119926486 -0.0063369495 0.0097889244 0.0337233056 -0.0470831512 -0.1373492671 -0.0247891544 0.0207169823 0.0710737684 0.0192880450 0.0441417317 0.0335525209 -0.0341068514 -0.0526362658 -0.0200541130 0.0420159711 -0.0128965381 -0.0788345914 0.1451960039 0.3814055809 0.3268800002 -0.1013229761 0.1252728869 0.3522450276 -0.1622732854 -0.3513451829 -0.2059754839 0.0606852686 0.0277564689 0.0332622435 -0.0869920313 -0.0068492869 -0.0157746812 0.0290551454 -0.0914604807 -0.2502292689 -0.0280418895 0.0123615480 0.1514614165 0.0006309593 0.0012711285 0.0048151052 0.0157570185 0.0149513305 0.0060868507 0.0122875684 0.0171120620 0.0318854286 -0.0244251985 -0.0256873821 -0.0360543133 0.0305611150 0.0125431402 -0.0374293568 0.1492129801 0.0220132530 -0.2589929538 -0.0045974859 -0.0135092688 -0.0010522722 0.0114025045 -0.0251623859 -0.1271826525 -0.0478911480 -0.0773697124 -0.1870960796 0.0714562321 0.0468181813 -0.0109010072 -0.0066862381 -0.0036104453 -0.0031816860 -0.1312935493 -0.1311157884 0.0825754925 -0.0009847467 0.0007862496 -0.0003090161 -0.0082098686 0.0079650981 -0.0115482613 -0.0011220260 0.0017523542 0.0013937658 -0.0001504039 -0.0010804157 -0.0003189823 -0.0003240624 -0.0003259395 -0.0002347671 0.0002080961 0.0001573490 0.0002509564 -0.0003357485 0.0004239146 -0.0000915423 0.0003541406 0.0002017805 0.0000730224 0.0046493492 0.0004390033 -0.0009933686 -0.0043968234 -0.0007326840 0.0002455318 -0.0000624540 0.0000345403 -0.0000326581 -0.0004701215 0.0003034470 -0.0021520283 -0.0001428057 -0.0001280839 0.0009279969 0.0009262502 -0.0007069089 0.0023278776 0.0031636028 -0.0011259731 -0.0004318737 0.0019346924 -0.0002494708 0.0008084155 -0.0019102549 0.0005168681 0.0009253706 0.0004762132 -0.0002216978 -0.0004077687 -0.0004468037 -0.0000055843 -0.0000517214 0.0092603249 0.0032480561 0.0020666994 0.0113308358 0.0024106345 -0.0084198922 -0.0075142772 0.0034373363 0.0148551067 -0.0000159346 -0.0003327854 -0.0003351012 -0.0002993846 -0.0001129564 -0.0002783261 0.0002315913 0.0000637241 -0.0006451428 -0.0019074894 -0.0005602348 -0.0004505295 -0.0005569112 0.0000386446 0.0009669755 0.0006045400 0.0006225095 0.0006065037 -0.0003496392 0.0008365671 -0.0006610031 0.0055156042 -0.0060560807 0.0007584719 0.0008869849 0.0001375563 -0.0002572011 0.0039784058 0.0031787022 0.0023353079 0.0016781448 0.0011445302 -0.0005871340 0.0001303727 -0.0001859383 -0.0000748196 0.0000037749 -0.0001582813 -0.0003642623 -0.0005776222 0.0003374235 -0.0001787918 -0.0000594205 0.0002436850 0.0003255635 0.0002033246 -0.0001924118 0.0002686743 0.0045674171 -0.0038439408 -0.0020144406 -0.0015390767 0.0002140947 -0.0015845377 0.0001541526 -0.0000993907 0.0000818828 -0.0015175331 0.0017262341 0.0009844802 0.0050770093 -0.0006685273 0.0032748519 -0.0001475763 -0.0002088803 0.0004923712 0.0000497498 0.0002366057 0.0001948303 0.0000221418 -0.0000093974 -0.0000619383 0.0000223910 0.0000077610 0.0000322672 0.0016503610 -0.0008365709 -0.0009504007 0.0004108901 0.0006627991 -0.0001899929 -0.0001474923 0.0004865955 0.0001342707 -0.0002467968 0.0005169632 0.0001917724 -0.0028247195 0.0012802628 0.0017363257 -0.0032371873 -0.0031156645 0.0015344337 -0.0002708348 -0.0002684542 0.0001624772 -0.0000108006 -0.0001155854 -0.0000055097 0.0020181186 -0.0008690567 -0.0017460859 -0.0010016790 0.0037245012 0.0009423001 0.0008280236 -0.0003454077 0.0005378414 0.0016069237 0.0000293107 0.0008205692 0.0001219864 0.0003867436 -0.0000156295 -0.0002434482 0.0000273891 -0.0001331948 0.0030810669 0.0001498724 0.0024185838 -0.0039234391 -0.0056712154 -0.0019515955 -0.0003963318 -0.0001943276 -0.0001894882 -0.0003834084 -0.0002894002 -0.0001967658 -0.0025669280 -0.0000681263 -0.0015834755 -0.0018332373 0.0035542540 -0.0013113488 0.0040183736 -0.0075583634 0.0044554761 -0.0157914719 0.0160494955 -0.0031613619 0.0045069457 0.0226245071 0.0348949872 0.0038159636 0.0085664854 -0.0157863123 0.0061248389 -0.0016871327 0.0026902000 -0.0316708635 -0.0044338466 0.0078719936 0.0017177651 0.0149116806 -0.0045884482 0.0018675108 0.0010662731 -0.0064068632 -0.0080382982 0.0078993710 0.0036374409 0.2080891843 -0.0288830208 -0.1043017709 0.0075373645 0.0102935086 -0.0020611955 0.0133640194 -0.0114862870 -0.0151193705 -0.0092864917 -0.0128668515 0.0041128326 0.0100841293 0.0288100478 0.0052770566 0.0514976176 0.0081849976 0.0281981005 0.0047604434 -0.0284071770 0.0005071740 -0.0285368775 -0.0170074691 -0.0096082655 0.5938888076 -0.1113500883 0.2993483397 -0.0185091015 -0.0065894664 -0.0059281673 -0.0034428691 0.0030309150 -0.0010979662 0.0009153948 0.0007855067 0.0014544154 0.0012815617 -0.0017153170 -0.0019470563 0.0002362904 0.0002532422 -0.0006979630 0.0019538289 -0.0010869393 0.0014048999 -0.0005912617 -0.0005752471 0.0002734532 -0.0000604575 -0.0001059132 -0.0000683888 0.0005388441 -0.0006246328 -0.0017689491 -0.0002973415 0.0001823254 0.0007307777 0.0002467432 0.0005891791 0.0004616077 -0.0005186322 -0.0006548328 -0.0001172530 0.0007303894 0.0004523944 -0.0006889062 0.0014348102 0.0034076064 0.0031640696 -0.0008872467 0.0013378630 0.0035095183 -0.0013960808 -0.0037297162 -0.0016731821 0.0008024071 0.0002830328 0.0002442228 -0.0015956767 -0.0000837866 -0.0006515073 0.0004167486 -0.0029209922 -0.0024392924 -0.0003948340 0.0003191719 0.0028012251 0.0000561115 0.0000496825 -0.0000513864 0.0002316515 0.0002681641 0.0001403750 0.0001914363 0.0001873751 0.0007122641 -0.0006076227 -0.0004962490 -0.0005116539 0.0005881815 0.0002386812 -0.0007018185 0.0026260693 0.0003398892 -0.0045370465 -0.0011255575 -0.0001864811 -0.0010956312 0.0001776345 -0.0008260676 -0.0019110254 -0.0006348888 -0.0011887298 -0.0030663852 0.0018041540 0.0010404041 -0.0003873268 -0.0005314247 -0.0005109053 -0.0000810773 0.0017644056 0.0003167445 0.0001361372 0.0607027773 -0.0415764351 0.0107273098 -0.0002004284 -0.0000944489 -0.0002786779 0.0001520206 0.0001058556 -0.0000350955 0.0001220123 0.0002214631 0.0001142133 -0.0001083199 -0.0000724389 0.0000466187 0.0000236531 0.0000403749 -0.0001514847 -0.0001205241 0.0000349366 -0.0000107534 -0.0000100197 0.0000676235 0.0000641589 -0.0003205641 -0.0002986780 -0.0001090422 0.0003810970 0.0003235355 0.0001164723 0.0002334790 0.0003426987 -0.0000171888 0.0003947770 -0.0000089877 0.0002887912 -0.0002327048 -0.0006617802 0.0007808089 0.0008431834 0.0011581712 0.0000378440 -0.0001127611 -0.0000710754 -0.0000205532 0.0015194026 -0.0005251508 -0.0003637888 0.0003411217 0.0000451298 -0.0003041425 0.0002137587 -0.0003862140 -0.0004472356 0.0002092437 -0.0004381393 -0.0002293322 -0.0016299200 -0.0002046614 0.0003252560 -0.0015157800 -0.0004944658 0.0011390581 0.0011527993 -0.0007038720 -0.0017649633 0.0275427442 0.0091240182 -0.0075708929 0.0027617865 0.0000302167 -0.0021955159 -0.0074437097 -0.0057368236 -0.0045639429 -0.0000430616 0.0003683136 0.0007063603 -0.0057348124 0.0019511456 0.0081160348 0.0045604249 0.0015013366 -0.0007528783 -0.0387049912 -0.0205651759 -0.0147493453 -0.0165041822 -0.0062168348 0.0024209997 0.0003938577 0.0000184628 -0.0001555958 -0.0237406073 -0.0085891811 0.0045771342 -0.0280205842 0.0028943805 0.0280559917 0.0073809879 -0.0023312402 0.0067226584 -0.0133581960 0.0172201644 0.0144950400 -0.0036044492 0.0010893767 -0.0027419627 -0.0166516810 0.0019271724 -0.0201499167 0.0117144080 -0.0075296660 0.0024900911 -0.0781358199 0.0729660693 0.0464371647 -0.0406320873 0.0276542955 -0.0063160609 0.0014544165 -0.0007333544 0.0003457857 -0.0527044133 0.0355923353 -0.0074930529 -0.0547048457 0.0133907847 -0.0556851419 0.0002535520 0.0000679506 -0.0001546068 0.0001209284 0.0000376810 -0.0000563871 0.0009222279 -0.0003571590 0.0008925325 0.0005014495 -0.0003712772 -0.0002568626 -0.0522097142 0.0145030315 0.0293604198 -0.0227669647 -0.0130775925 0.0141052233 0.0044909370 -0.0085876232 -0.0031713409 0.0079545885 -0.0140670550 -0.0058605340 0.0455063419 -0.0216872981 -0.0302436556 0.1034819633 0.1027990087 -0.0497832396 0.0114136044 0.0080708844 -0.0068679261 0.0005012948 0.0046325997 -0.0001181277 -0.0217898655 0.0176787191 0.0215383410 0.0313211437 -0.1109247307 -0.0267909943 -0.0489287372 0.0419224897 -0.0308072463 -0.1505883100 0.0028307890 -0.0783455542 0.0128797500 -0.0278408834 0.0123843665 0.0029897008 -0.0096592753 0.0026216685 -0.1248242756 -0.0174358419 -0.1012643306 0.1950195054 0.2818445883 0.0911649846 0.0230012386 0.0234415050 0.0103055208 0.0327650065 0.0297810832 0.0164883468 0.2037239984 0.0147023538 0.1221075035 0.1681369123 -0.3252280593 0.1165523436 0.0001104190 -0.0000427275 0.0000502235 0.0000085479 0.0003745797 0.0005500494 0.0000557331 0.0004261991 0.0005581864 0.0002255094 0.0001161763 0.0000343513 -0.0000599375 0.0000286514 -0.0000350385 0.0000017790 0.0003971972 0.0003208825 0.0007579126 -0.0001994673 -0.0003730176 0.0003088478 0.0000383358 0.0006966929 -0.0230453955 0.0208665696 0.0098324861 0.5694602686 -0.0824791628 -0.2849141438 0.0093369057 0.0271378889 -0.0002156588 0.0515141051 -0.0205564915 -0.0254280255 0.0109610459 -0.0415639318 -0.0115251464 -0.0184062326 -0.0107977077 -0.0109281254 -0.0217247164 0.0029816553 -0.0044611237 0.0030355631 0.0093000810 0.0021408317 0.0099852131 0.0043146877 0.0030107024 -0.1976155482 0.0376926435 -0.0992220014 0.0129664934 0.0050197453 0.0078883581 -0.0215867870 0.0186286263 0.0102773949 0.0007965202 0.0005086958 -0.0019289491 0.0003359517 -0.0012089539 0.0017399223 -0.0001786607 -0.0005233376 0.0019713573 -0.0008826888 0.0037880704 -0.0018709548 0.0010299055 0.0009832746 -0.0002520251 -0.0001753054 0.0000452319 0.0003378430 -0.0000693791 -0.0002553526 -0.0002426221 -0.0001812729 0.0002721805 0.0005787074 0.0001012483 0.0001467813 0.0000510059 -0.0000430173 -0.0001272686 -0.0000717031 0.0002516682 -0.0007238686 -0.0010314915 0.0013465115 0.0031036707 0.0027718572 -0.0008846738 0.0007949817 0.0026265005 -0.0007384495 -0.0030402731 -0.0013907269 0.0001411270 -0.0002287299 0.0002941089 -0.0002662096 0.0002043810 -0.0003049752 0.0013517304 -0.0011483718 -0.0028719197 -0.0003757049 -0.0000383647 0.0012164579 -0.0000056715 0.0001160231 0.0001789332 0.0004900801 0.0002633095 -0.0003035826 -0.0001708574 -0.0005096903 -0.0005055446 -0.0002317981 -0.0001121738 0.0003736740 0.0004713305 0.0003480026 0.0000151576 0.0033440118 0.0009107981 -0.0070712797 -0.0039197675 -0.0018312228 -0.0058618034 -0.0029262835 -0.0001146335 0.0062607016 0.0015229273 0.0014932634 0.0018298986 0.0004798632 0.0000425283 0.0002025559 0.0002751059 0.0003773763 -0.0004090577 -0.0035494449 -0.0043238949 0.0028486492 -0.0227495949 0.0152277598 -0.0032344004 -0.0001421097 -0.0001531593 -0.0002260203 0.0001165031 -0.0000567497 -0.0001804164 -0.0000012388 0.0000317032 0.0001143347 0.0000459849 0.0000863582 -0.0000635128 0.0000082668 -0.0000156110 -0.0000095475 -0.0003263044 0.0000640844 -0.0000796726 -0.0000117317 -0.0000369486 0.0000704263 -0.0000520866 0.0000278367 0.0000651036 -0.0000272273 -0.0000692554 -0.0000193543 -0.0000042273 -0.0004701537 0.0002027823 -0.0002769690 -0.0000355000 0.0004642558 0.0000024282 0.0002074283 -0.0000943224 0.0001065340 -0.0008349290 0.0011562264 0.0023416945 -0.0003117692 -0.0001307201 -0.0002041061 0.0000754934 0.0005902569 0.0001492151 -0.0000052870 -0.0002123905 0.0001153687 0.0000175081 -0.0002387729 -0.0000509230 0.0000531110 0.0001039056 0.0002327712 -0.0000254179 -0.0003288063 0.0000140624 0.0000808094 -0.0000191840 -0.0002122384 0.0001616893 0.0002610295 0.0748669016 0.0243213496 -0.0169518898 0.0049109606 -0.0009914051 -0.0062163165 -0.0179100857 -0.0148985570 -0.0131783475 0.0043699180 0.0021855635 0.0007683031 -0.0143290859 0.0052828081 0.0208033061 0.0096636303 0.0032611274 -0.0025389663 -0.1285116499 -0.0693471565 -0.0450182032 -0.0388159163 -0.0159431323 0.0026499385 0.0009372508 0.0000992487 -0.0001538308 -0.0524530521 -0.0169598596 0.0136192011 -0.0816271164 0.0028174182 0.0815187138 -0.0024383273 0.0006767160 -0.0025899318 0.0045933071 -0.0061449303 -0.0054716527 0.0004060957 0.0000747538 0.0006974126 0.0059082244 -0.0006245660 0.0072450368 -0.0036716861 0.0024475661 -0.0010336006 0.0329792770 -0.0312512805 -0.0187720698 0.0145098375 -0.0099590063 0.0021495198 -0.0004958956 0.0002879663 -0.0000684870 0.0171243913 -0.0108931318 0.0033893870 0.0212561204 -0.0068369435 0.0219203026 0.0003372554 0.0002385581 0.0011157373 -0.0007308818 -0.0003852599 -0.0014984134 -0.0002206993 0.0001278681 0.0000115910 -0.0000489899 -0.0000425755 -0.0001977899 -0.1395284568 0.0530847195 0.0800639221 -0.0519766973 -0.0121523231 0.0274993791 0.0159713974 -0.0333241925 -0.0117297113 0.0191109897 -0.0392618899 -0.0146791298 0.2388985840 -0.0970023673 -0.1524462939 0.2381127755 0.2268124644 -0.1150636516 0.0156280792 0.0173090377 -0.0102704986 0.0059143019 0.0058067475 -0.0030008679 -0.1535584560 0.0621536417 0.1260329443 0.0906509847 -0.3215336617 -0.0833202574 0.0157131370 -0.0042801400 0.0061905832 0.0524187394 0.0040947108 0.0272130750 0.0008107256 0.0059645433 -0.0008504019 -0.0034708289 0.0011756672 -0.0019096589 0.0833057933 -0.0013890162 0.0641466888 -0.0726541130 -0.1056942039 -0.0362205197 -0.0104874204 -0.0108025263 -0.0048562692 -0.0106437847 -0.0109508105 -0.0052850974 -0.1170645523 -0.0037632624 -0.0686803955 -0.0484376225 0.0867183094 -0.0328901065 0.0000282480 -0.0000104020 0.0001250338 -0.0000515921 0.0000585024 0.0000150178 0.0002177287 0.0003018758 0.0003327149 0.0001792368 0.0002211914 0.0000402047 0.0000231616 0.0000611208 0.0001342573 0.0000067927 -0.0004092039 -0.0003556941 0.0005323738 -0.0000018679 -0.0000940180 -0.0001736223 0.0000455325 -0.0001554018 -0.0147798583 -0.0737137109 -0.0086848826 -0.4413796846 0.1429427433 0.2260342654 -0.0275653228 0.0513834073 0.0217261939 0.0179704149 0.0353010973 -0.0121646243 0.0400459236 -0.1442245874 -0.0324551566 -0.0814651991 -0.1218880377 -0.0367504868 -0.0092842995 0.0386377810 -0.0134863552 0.0395531537 0.0420773292 0.0214901081 -0.0061317004 -0.0718596290 -0.0118159090 0.4180972778 -0.0008033458 0.2043188285 0.0644710203 0.0366377317 0.0301386187 -0.0492183936 0.0563471060 0.0281018350 0.0007794485 0.0034384211 -0.0080278605 -0.0001297946 -0.0022599000 0.0070171840 -0.0014444952 -0.0022170723 0.0059382078 -0.0145934396 0.0229676458 0.0142232850 0.0064578004 0.0069185322 -0.0007619243 -0.0021441099 -0.0001997224 0.0034645484 0.0025355572 0.0001298969 -0.0042253966 -0.0024498195 0.0015288538 0.0058177549 0.0010938945 0.0012720383 0.0004238100 -0.0026022324 -0.0022786851 -0.0006028401 0.0047314408 -0.0048892369 -0.0116696804 0.0149548031 0.0374094723 0.0318683159 -0.0073682495 0.0070294884 0.0205562652 -0.0116094529 -0.0466117793 -0.0197487194 -0.0009117661 0.0028858258 0.0047646464 0.0072362210 0.0018089008 0.0097485499 -0.0303902713 0.0429145774 0.0534564824 0.0047537319 -0.0038213490 -0.0281232560 0.0007552003 0.0007819185 0.0005789947 -0.0009396074 -0.0018889493 -0.0041223501 -0.0041059011 -0.0049144011 -0.0088117634 0.0048379331 0.0051258819 0.0079659841 -0.0059773458 -0.0024788496 0.0067317233 -0.0179556736 -0.0038173395 0.0302154306 -0.0017196829 -0.0022482650 -0.0059409343 -0.0098134612 0.0053832429 0.0422258752 0.0123083047 0.0179252461 0.0411856560 -0.0075199672 -0.0052087066 0.0030116519 0.0010601091 0.0021382484 -0.0016301322 -0.0286092283 -0.0347057669 0.0204962914 -0.0714872385 0.0553855818 -0.0316031728 0.0045373103 0.0024802843 0.0052416711 0.0001007901 0.0008863997 0.0014311856 -0.0004980925 -0.0017608798 -0.0016779465 -0.0001282845 -0.0002205887 -0.0000428566 -0.0000321862 0.0001788272 0.0000879370 -0.0006609054 0.0003506104 -0.0001110553 -0.0000316155 0.0004032897 0.0002303969 -0.0000994920 0.0005690314 0.0004940790 -0.0000821861 -0.0004881610 -0.0004686767 0.0003798285 0.0014663886 -0.0000741363 0.0015983795 0.0001940453 -0.0020071848 -0.0001897220 -0.0012165114 0.0011561827 0.0016356019 0.0003739934 0.0025588721 0.0026444027 -0.0019603238 -0.0007287310 0.0030201223 -0.0005826010 0.0004531876 0.0001744244 0.0003332803 0.0000177675 0.0005753941 -0.0012204159 -0.0011810139 0.0006522343 -0.0012130330 -0.0007072261 0.0014978414 0.0000162069 -0.0001870615 0.0013939774 0.0003646848 -0.0012364796 -0.0011365338 0.0008641989 0.0018708798 0.0828436435 0.0297445358 -0.0378823112 0.0285748686 0.0105028480 -0.0025355085 -0.0297951444 -0.0198732977 -0.0112844199 -0.0140407295 -0.0065480189 -0.0010328696 -0.0205859154 0.0061087513 0.0287794737 0.0161048815 0.0051319385 0.0010312478 -0.0274972065 -0.0295168244 -0.0183298574 -0.1079860270 -0.0154466015 0.0484177331 0.0006681719 0.0006077672 -0.0002954898 -0.0774432354 -0.0223255940 0.0168969310 -0.0762087822 0.0117402216 0.0808622892 -0.0230791755 0.0152316904 -0.0005849985 0.0212688418 -0.0242151521 -0.0156350912 0.0133726940 -0.0101039848 -0.0013978773 0.0228594823 -0.0024221616 0.0294950697 -0.0167791788 0.0094154811 0.0016939737 0.0355692988 -0.0435666866 -0.0292967875 0.0854853794 -0.0434664864 0.0318189932 -0.0007107770 0.0005792897 -0.0001845909 0.0706803698 -0.0412722635 0.0128492571 0.0793746806 -0.0118702813 0.0773059130 0.0013991844 -0.0001850375 -0.0049932423 0.0047828350 0.0017237740 0.0043628510 -0.0020938202 0.0000624768 -0.0050351705 -0.0036145233 0.0034010948 0.0047789839 0.0237489869 0.0164213726 -0.0104804162 0.0425607345 0.0536238106 -0.0186465800 0.0067692593 -0.0064168320 -0.0049965408 -0.0012136611 0.0053440805 0.0009268176 0.1554655627 -0.0409649999 -0.0884592842 -0.0853978260 -0.0991871666 0.0397406783 -0.0352258360 -0.0142135289 0.0175912587 0.0037354136 -0.0189326007 -0.0029974751 -0.2561164894 0.0384460895 0.1726468363 0.0104772223 -0.0599007152 -0.0171039876 -0.0183452061 0.0571386219 -0.0139946929 -0.0092367944 0.0214070462 -0.0048686971 0.0287676950 -0.0211515795 0.0160428258 -0.0099139504 -0.0140286443 -0.0036858754 0.2508799026 -0.0444647607 0.1727732509 -0.0467987460 -0.0772125690 -0.0274126056 -0.0092947258 -0.0037681047 -0.0055385187 0.0004830102 0.0020345870 -0.0000507857 -0.1594367569 0.0119256827 -0.0863168706 0.0389054199 -0.1024410798 0.0289299616 -0.0011773289 -0.0001414653 -0.0024247441 -0.0000031104 -0.0031647928 -0.0041405504 -0.0038080021 -0.0049407075 -0.0060259284 -0.0039878971 -0.0040678032 -0.0018245423 -0.0015708547 -0.0012517572 -0.0015652863 0.0031872759 0.0033710030 0.0020350803 -0.0093190921 -0.0029734624 0.0038397939 0.0008090570 -0.0008082864 0.0019864637 -0.0022747780 -0.0091452668 -0.0009470428 -0.0514182363 0.0161598612 0.0264614887 -0.0039154416 0.0056613014 0.0028233904 0.0023188460 0.0043792130 -0.0012794757 0.0050182506 -0.0166729334 -0.0039828884 -0.0068697010 -0.0117947228 -0.0030253787 -0.0011226636 0.0036372752 -0.0016151970 0.0040939794 0.0040967414 0.0022268085 -0.0003036872 -0.0075267276 -0.0011060442 0.0379139987 0.0003191718 0.0185326975 0.0055411900 0.0032125916 0.0034516207 -0.0062231313 0.0068165216 0.0031920116 0.0012529691 -0.0002881195 -0.0022472645 -0.0010485861 0.0010933122 0.0018388305 -0.0024629014 -0.0012978336 0.0024053760 0.0812607733 -0.1516527175 -0.1226023928 -0.0109536825 -0.0181026228 -0.0069212676 0.0128923092 0.0032406326 -0.0173059264 -0.0322637312 0.0060697871 0.0624679844 0.0205258275 -0.0079360473 -0.0451436786 -0.0106594352 -0.0177989056 -0.0095241726 0.0267226635 0.0302012760 0.0052069124 -0.0435946021 0.0113101597 0.0775011004 -0.1020530847 -0.2693315457 -0.2306225453 0.0482908293 -0.0579958170 -0.1578949396 0.1129214559 0.3228590628 0.1530700787 0.0023319718 -0.0291634669 -0.0457750931 -0.0373169267 -0.0172529626 -0.0570742030 0.2236288812 -0.2772448821 -0.3990470974 -0.0391192053 0.0242528396 0.1840446670 -0.0044942790 -0.0038966504 -0.0029856207 0.0118145637 0.0160140719 0.0261317468 0.0234365405 0.0245912079 0.0479477991 -0.0307252501 -0.0319821325 -0.0449965169 0.0423562591 0.0189444019 -0.0424720200 0.1514990179 0.0307332863 -0.2597139292 -0.0205276247 0.0045320520 -0.0091819711 0.0303355201 -0.0311303535 -0.1968229535 -0.0662674500 -0.1046313507 -0.2498377886 0.0444318690 0.0272402267 -0.0166386507 0.0062072655 0.0025053886 0.0038708093 0.1469550504 0.1444439697 -0.0932270543 -0.0076632739 0.0059100070 -0.0034431624 -0.0226850667 0.0120172199 -0.0087398340 -0.0130824589 0.0024223803 0.0105880038 -0.0010116837 -0.0062641036 -0.0048560692 -0.0005056469 -0.0001488746 0.0000272242 0.0005357029 0.0003361157 0.0004136602 -0.0000267284 0.0008011388 -0.0002004814 0.0010181309 0.0002361020 -0.0004490260 0.0217361057 0.0021918585 -0.0109679332 -0.0128842488 0.0004340577 0.0087763629 -0.0015815058 -0.0003032952 -0.0016707689 -0.0018310421 0.0006937685 -0.0036167464 0.0005716125 0.0001239571 0.0000443005 0.0005063305 -0.0010644179 0.0021109970 0.0011930205 -0.0013664240 -0.0007648024 0.0032261960 -0.0001745235 0.0015253909 -0.0061411490 0.0009597230 0.0038594588 0.0002833014 0.0011958772 0.0008680566 -0.0008248165 0.0013340310 0.0002504943 0.0246530446 0.0084262465 -0.0037927755 0.0232118461 0.0104098321 -0.0113797094 -0.0153681929 0.0049239978 0.0210406143 0.0101418186 0.0040437103 -0.0040544803 0.0040531344 0.0014775639 -0.0005157303 -0.0039696036 -0.0024327221 -0.0009545632 -0.0020579828 -0.0005656280 0.0005317229 -0.0028778110 0.0002884443 0.0030466566 0.0024788642 0.0004969292 -0.0005599966 0.0011158888 -0.0024979227 -0.0011125272 -0.0178504342 0.0000054414 0.0077803407 0.0005496698 -0.0000244491 0.0000583487 -0.0137839829 -0.0045793561 0.0003983719 -0.0057972753 0.0010381764 0.0067872424 -0.0024148733 0.0016032357 0.0000163948 0.0021814885 -0.0025228314 -0.0017380522 0.0013489005 -0.0010472715 -0.0001893774 0.0024520743 -0.0002218089 0.0032394548 -0.0017482857 0.0010290133 0.0001309260 0.0045886370 -0.0050398385 -0.0033899628 0.0083751004 -0.0046218190 0.0030160403 -0.0000014327 -0.0000528853 -0.0000513266 0.0073436723 -0.0040880830 0.0015416688 0.0082584809 -0.0019895561 0.0087641317 0.0002155838 -0.0001149525 -0.0003982297 0.0003559367 -0.0000728849 0.0002201164 -0.0002169830 0.0000189940 -0.0006095429 -0.0004113602 0.0004563172 0.0006069536 0.0031876880 0.0028625032 -0.0013121123 0.0060146460 0.0073613737 -0.0026857868 0.0008126500 -0.0012943508 -0.0006790170 -0.0001567197 0.0006280543 0.0001152701 0.0225490095 -0.0064131960 -0.0127488488 -0.0112474257 -0.0132108928 0.0052955245 -0.0049016124 -0.0019796452 0.0024836183 0.0006220931 -0.0025474881 -0.0004703011 -0.0357551351 0.0053801340 0.0242302448 0.0014943391 -0.0078442121 -0.0022990698 -0.0024999057 0.0056947578 -0.0017898920 -0.0003914966 0.0022429899 -0.0002066262 0.0027091991 -0.0022150267 0.0014851568 -0.0007708844 -0.0014949972 -0.0002288697 0.0260692902 -0.0046876637 0.0179486446 -0.0035488415 -0.0064087733 -0.0021690349 -0.0008216120 -0.0005232133 -0.0004838545 -0.0000849429 0.0001039282 -0.0000697610 -0.0175395459 0.0011507249 -0.0095084917 0.0033227341 -0.0092552259 0.0025408926 0.0085767512 -0.0077252414 0.0059450616 -0.0155461980 0.0261177735 0.0053625707 0.0066830282 0.0162224053 0.0302600149 -0.0046858808 0.0079325184 -0.0299895626 0.0095338044 -0.0033925326 0.0011045756 -0.0304226500 0.0020275150 0.0138769994 0.0041615424 0.0208417657 -0.0095228042 0.0179592153 0.0118795196 -0.0117355865 0.0233083923 0.0564016765 0.0018909941 0.2081476272 -0.0449724444 -0.1046338049 0.0472830814 -0.0098669732 -0.0253854910 -0.0133624421 -0.0183007312 -0.0025904034 -0.0304405967 0.0564538567 0.0193116128 -0.0530106867 -0.0504931641 -0.0244095516 -0.0094699467 0.0257992673 0.0010601751 0.0484318617 0.0004602866 0.0249632601 0.0055555052 -0.0645928986 -0.0058162973 0.2092127639 -0.0180375992 0.1042476497 0.0460714654 0.0250094115 0.0146858978 0.0316795881 -0.0345935354 -0.0110839132 0.0059056453 -0.0005375707 0.0000099856 -0.0091867097 0.0118264077 0.0071732597 -0.0105427309 -0.0107935718 -0.0084294569 -0.0043326241 0.0033981425 -0.0046088397 0.0040502647 0.0038440876 -0.0016205757 -0.0006876694 -0.0000793930 0.0010081772 -0.0019719087 0.0009888699 0.0037485733 0.0004147733 0.0003515146 -0.0002991946 -0.0002807456 -0.0011515720 -0.0012775214 0.0014226582 0.0017934630 0.0005519578 -0.0014000566 -0.0030702761 -0.0009468845 -0.0001406515 -0.0003952877 -0.0008746839 0.0006416023 -0.0018152514 -0.0031188484 -0.0009246629 0.0034814158 -0.0008356038 0.0000209178 -0.0008541024 -0.0012020338 0.0009111261 -0.0012724246 0.0004789428 0.0078341161 -0.0065142617 -0.0096712432 -0.0009246072 0.0002853889 0.0006965809 -0.0006076906 -0.0005365581 -0.0000078724 -0.0002474322 -0.0004420714 0.0002648209 0.0013754810 0.0017061358 0.0018281911 0.0002405740 -0.0003596781 -0.0021306380 0.0002105126 0.0000576381 -0.0000930540 -0.0037151630 0.0007511856 0.0055124538 0.0066815890 0.0036446769 0.0102573445 0.0046765026 -0.0002296449 -0.0121272765 -0.0032655329 -0.0034094213 -0.0061757349 -0.0008263803 0.0001120815 -0.0002563938 0.0023550140 0.0025155201 0.0006157880 -0.0134119846 -0.0070221673 0.0041780309 -0.0630500968 0.0467556560 -0.0233761424 0.0100337814 0.0179199602 0.0166761349 -0.0060630335 0.0017914013 0.0065432143 -0.0023334148 -0.0095596150 -0.0076070430 -0.0000914728 0.0005964274 0.0000768244 0.0001130767 0.0001140210 0.0005742944 0.0032163882 0.0002864481 0.0012386012 0.0003720575 0.0003588156 -0.0002874463 0.0093801037 0.0034835807 -0.0023012406 -0.0061281917 -0.0018029163 0.0019823428 -0.0009976124 0.0016516552 -0.0014570472 0.0007865871 0.0003703331 -0.0040480746 0.0006804644 -0.0000832267 -0.0006022665 -0.0061653340 -0.0020491302 -0.0085467659 -0.0153068903 -0.0020930949 -0.0002168301 -0.0065212714 0.0031687448 -0.0051453911 -0.0028352311 0.0005949595 0.0020947500 -0.0002201423 0.0003129146 0.0011073760 -0.0001251744 0.0001246683 -0.0003951626 0.0168033626 0.0038752167 -0.0020817021 0.0154880353 0.0065798429 -0.0097802871 -0.0113339613 0.0054229622 0.0162292868 -0.0689135112 -0.0236700567 0.0260858668 -0.0209233809 -0.0078758316 0.0027427704 0.0213330966 0.0155512284 0.0104991738 0.0104473427 0.0041844170 -0.0005609654 0.0162094549 -0.0050151824 -0.0226270613 -0.0150086324 -0.0032850477 0.0031091554 0.0397660311 0.0358047697 0.0182656726 0.0800259191 0.0124441329 -0.0340441417 -0.0007272224 -0.0003106936 0.0002642753 0.0636933786 0.0201713731 -0.0131181650 0.0617752739 -0.0072399185 -0.0644069058 -0.0185555064 0.0127804290 -0.0009007728 0.0161222871 -0.0196412169 -0.0144181687 0.0109465960 -0.0078154492 -0.0001160662 0.0190225432 -0.0016827339 0.0247894109 -0.0162886212 0.0080718986 -0.0022004139 0.0400581107 -0.0497845717 -0.0283463464 0.0695290577 -0.0360389973 0.0252146200 -0.0006724814 0.0003013130 -0.0003536120 0.0609204109 -0.0371771922 0.0103006320 0.0684173971 -0.0127351132 0.0659810852 -0.0011180342 0.0000319298 0.0033061098 -0.0031215684 -0.0011292522 -0.0027388992 -0.0016543216 0.0001822600 -0.0036171262 -0.0026779243 0.0025915675 0.0034485302 -0.0225339743 -0.0588854751 0.0043436603 -0.0734100283 -0.0740205676 0.0349261575 -0.0008456633 0.0287436913 0.0041723616 0.0002371162 0.0006325482 -0.0002707881 -0.2931611007 0.1015704471 0.1730098099 0.0760248335 0.0959760886 -0.0342770108 0.0463107114 0.0225210974 -0.0241615434 -0.0067121628 0.0249745856 0.0047970856 0.3874259090 -0.0587042594 -0.2789206122 -0.0033949786 0.0351186406 0.0153529284 -0.0432065640 0.0885509794 -0.0292188259 0.0008090537 0.0599071890 -0.0004426545 0.0399618543 -0.0336116557 0.0229637741 -0.0155238451 -0.0190023252 -0.0058175017 0.3791118711 -0.0699235563 0.2786279561 -0.0325567638 -0.0561271316 -0.0261828159 -0.0102796880 -0.0259306482 -0.0050788601 -0.0020230401 -0.0018479598 -0.0007471462 -0.3056275169 0.0009894436 -0.1674753301 0.0377125076 -0.1117413680 0.0282427634 -0.0017906095 -0.0047650404 -0.0058754815 -0.0087256514 -0.0039092117 -0.0200050669 -0.0089484983 -0.0102383981 -0.0085889938 -0.0169388423 -0.0104041693 -0.0205822922 -0.0020363270 -0.0063663333 -0.0050348314 -0.0070735250 0.0111598036 0.0131456441 -0.0352675780 -0.0041744834 0.0121440879 0.0085207923 0.0001177603 0.0033882299 0.0019286024 0.0047590195 0.0001925102 0.0124155106 -0.0023778546 -0.0067731525 0.0045762068 -0.0005523287 -0.0022556880 -0.0014333376 -0.0016140122 -0.0007228721 -0.0030540362 0.0043097579 0.0021888083 -0.0057256744 -0.0070287117 -0.0024496540 -0.0006653319 0.0030961996 0.0001736802 0.0089049075 -0.0014968627 0.0045958655 0.0015779417 -0.0112145111 -0.0008082040 0.0293177402 -0.0038918510 0.0145395494 0.0079888441 0.0041129236 0.0011017007 0.0043675353 -0.0042096043 -0.0005220501 -0.0058878697 0.0082264096 0.0052977583 0.0082750560 -0.0128898370 -0.0083229793 -0.0004115121 -0.0018308973 -0.0000504738 -0.0174868550 0.0201199780 0.0125770205 -0.0345750634 -0.0313269560 0.0133417833 0.0052699032 0.0006542175 -0.0080106068 0.0100286441 0.0009307488 -0.0114151913 0.0004959887 -0.0027202747 -0.0036215546 -0.0010745973 0.0027932969 0.0055346977 -0.0055366597 -0.0089187999 -0.0031153806 0.0036001346 0.0185466030 0.0152580012 -0.0102327461 -0.0229733547 -0.0196354659 0.0024099046 0.0007946831 -0.0048184686 0.0012036308 0.0126756257 0.0086088798 -0.0127416527 0.0024603630 0.0085456685 0.0148918388 0.0090818991 -0.0145263678 -0.0005310392 0.0635946651 -0.0686115095 0.0113010983 0.0036426811 0.0121177241 0.0005276977 0.0005246049 0.0003447721 -0.0034454782 0.0005464102 0.0042548598 -0.0020559117 0.0010307269 0.0011241997 -0.0040216803 -0.0027091031 -0.0004479836 0.0003049304 0.0000677873 -0.0026243650 0.0012430237 -0.0070774226 0.0096702145 -0.0100730780 -0.0246330476 -0.0205659852 0.0089010561 -0.0041796690 -0.0288650533 0.0033865763 0.0002584182 0.0004160831 -0.0098993105 -0.0080976122 0.0023232396 -0.0089190648 -0.0099873146 0.0010138776 0.0456253235 0.0225136510 -0.0222944587 -0.0121749630 0.0089099302 -0.0040782968 -0.1711499456 -0.2476549134 -0.2173063662 0.0602072831 -0.0263631550 -0.0728317256 0.0282684867 0.1201163474 0.0945508478 -0.0002978810 -0.0089585612 -0.0003484262 -0.0015806363 -0.0046293455 0.0032193134 -0.0112971847 -0.0076678689 -0.0045009849 -0.0021977030 -0.0059063042 -0.0014467772 -0.0912180144 -0.0395721546 0.0157346904 0.0616901791 0.0227114004 -0.0150114504 -0.0026814430 0.0103809090 -0.0067506484 -0.0029322104 -0.0043353004 -0.0018176190 0.0035393576 0.0170471196 -0.0217307433 0.0277231068 0.0256037989 0.0209108431 0.0415233194 0.0234642453 0.0076750392 0.0188660573 -0.0164350996 0.0120390749 0.0161808711 -0.0082076995 -0.0098023465 -0.0076567975 0.0078851226 0.0106074697 -0.0070154046 0.0095511194 0.0077353768 -0.1772072399 -0.0384900074 0.0203896414 -0.1593274745 -0.0727544015 0.1034914997 0.1255958526 -0.0643119712 -0.1813096358 -0.0064946119 -0.0018878793 0.0026607693 -0.0025222854 -0.0012247255 0.0003640935 0.0027102140 0.0013620637 0.0008023489 0.0015256490 0.0007590719 0.0002403213 0.0014109382 -0.0005859855 -0.0023614514 -0.0014500970 -0.0004012889 0.0002521386 0.0007437995 0.0033096852 0.0006430400 0.0082757692 0.0036772328 -0.0058894460 -0.0000580636 0.0001589074 0.0008853225 0.0063145324 0.0021872986 -0.0014116320 0.0041837249 -0.0005940319 -0.0049716475 -0.0031484249 0.0021684311 -0.0002927408 0.0028350127 -0.0036813429 -0.0023699406 0.0025749728 -0.0011549531 0.0010832543 0.0042161684 -0.0008240201 0.0040333158 -0.0038560924 0.0019514893 -0.0013234939 0.0017183337 -0.0042963064 -0.0027931821 0.0178697427 -0.0061580858 0.0073385878 -0.0022014229 0.0019939393 0.0006637568 0.0186488259 -0.0160596597 -0.0013192404 0.0081387146 -0.0021728463 0.0096365256 -0.0000173753 -0.0000122957 -0.0002341665 -0.0005461708 -0.0003599574 -0.0002585149 0.0000714543 0.0000594542 0.0013445684 0.0006254313 -0.0013922062 -0.0019421366 -0.0010330393 -0.0061524732 -0.0002730485 -0.0071489192 -0.0065963385 0.0034736277 0.0000799507 0.0030398230 0.0003695028 -0.0001885487 0.0005285640 0.0001364130 -0.0305346297 0.0107386409 0.0178115738 0.0054089932 0.0077578495 -0.0024671057 0.0042172461 0.0019117802 -0.0022376502 -0.0005666089 0.0022619224 0.0004084472 0.0376430199 -0.0061021462 -0.0282072455 -0.0003629316 0.0035089492 0.0014712530 -0.0103792186 0.0162262503 -0.0067859502 0.0000176600 0.0114372985 -0.0001711956 0.0064335629 -0.0065668248 0.0037039688 -0.0022826238 -0.0041452664 -0.0006965081 0.0704341581 -0.0135358878 0.0506991538 -0.0002085069 -0.0029992788 -0.0019210122 -0.0011907935 -0.0048086289 -0.0005425150 -0.0003295479 -0.0002083002 -0.0001232133 -0.0564860010 0.0001821042 -0.0310423593 0.0061770360 -0.0181453798 0.0045651384 0.0350707944 0.0645619498 0.0786522293 0.1175592280 0.0779163557 0.2895708699 0.1022350430 0.1391803133 0.1314226454 0.2119262170 0.1239614278 0.2610339739 0.0464752322 0.0847312160 0.0672471953 0.1233554326 -0.1405208773 -0.1704122955 0.4512393974 0.1152933125 -0.1738091516 -0.1072754941 0.0135282030 -0.0969125822 -0.0074795479 0.0040283351 0.0034850383 0.0448653091 -0.0456760466 -0.0272783737 -0.0259019488 -0.0279901737 0.0090876816 -0.0203108063 -0.0165854865 0.0048430478 -0.0183154444 0.0447040315 0.0145490524 0.0321011326 0.0384466592 0.0160921953 0.0159824272 -0.0218895777 0.0060321983 0.0209413242 -0.0369797202 0.0098309662 0.0098260823 -0.0030842579 0.0033639717 -0.0699587920 -0.0284527814 -0.0324346700 -0.0173004815 -0.0100002350 -0.0113042145 0.0163566170 -0.0176821745 -0.0091809407 -0.0074510466 0.0112982828 0.0118739052 0.0126171022 -0.0190032498 -0.0154557359 -0.0012543459 -0.0035172603 -0.0035005152 -0.0011657346 -0.0036585439 0.0064518056 -0.0337684546 -0.0323820782 0.0098784594 0.0069672689 0.0003112291 -0.0116304007 0.0076057738 -0.0051506459 -0.0210006939 0.0000212331 -0.0027128234 -0.0021972434 -0.0011778917 0.0043086947 0.0070793002 -0.0040099914 -0.0081104214 -0.0009274053 0.0023156782 0.0206757352 0.0175562809 -0.0157537766 -0.0313352197 -0.0250246884 0.0070636725 -0.0010075694 -0.0123093796 0.0072365689 0.0539758852 0.0251622639 -0.0098233630 0.0009182551 0.0118810906 -0.0115293946 0.0201158732 -0.0298883284 0.1171840158 -0.2359867334 0.0436446652 0.0004919618 0.0006234267 0.0257592034 -0.0007638233 -0.0000204569 0.0013993535 -0.0020189659 0.0030650082 0.0036291750 0.0027639960 0.0011246383 0.0029491877 -0.0038426937 -0.0031300461 -0.0052477262 0.0043242136 0.0031014829 -0.0035278745 0.0317435151 -0.0116408737 -0.0359113878 -0.0133820157 -0.0015352498 -0.0160675837 0.0033662370 -0.0058302312 -0.0184484236 -0.0017863579 -0.0092187620 -0.0193595902 -0.0049540759 -0.0060136126 0.0024100262 -0.0089941304 -0.0123558073 0.0019982828 0.0584554451 0.0531941543 -0.0353887200 -0.0135517736 0.0098132972 0.0005854846 0.2743538984 0.0875132047 -0.0473919241 0.0978377188 0.0031830065 -0.0827363639 0.0155028283 0.0503277726 0.0419251353 0.0027861822 -0.0055952075 -0.0037180102 -0.0033645168 -0.0020836027 0.0042666906 -0.0053747071 -0.0028440060 0.0007003822 -0.0094657659 0.0027467705 0.0069410807 -0.1895348820 -0.0261380940 0.0987992245 0.0996283367 -0.0101653861 -0.0775969080 0.0086229871 0.0174703950 0.0057406167 0.0119740272 -0.0016777932 -0.0204209125 -0.0016377306 0.0087429472 -0.0054684430 0.0082862761 0.0173782187 0.0001757557 0.0106009206 0.0065148577 0.0039275550 0.0120065734 -0.0080592158 -0.0059577165 0.0504089602 -0.0037555366 -0.0301750241 0.0025842850 -0.0228986456 -0.0181406661 0.0105201051 -0.0227436093 -0.0082300102 -0.1819763058 -0.0679557161 0.0286307926 -0.1847707966 -0.0701646794 0.0854605882 0.0923634859 -0.0089082750 -0.1071434828 0.0093937415 0.0044707334 0.0025441275 -0.0005965450 -0.0014431833 -0.0023758719 -0.0000225643 -0.0019679784 -0.0029825933 -0.0013063861 0.0012170072 0.0032227076 -0.0028397030 -0.0002332162 0.0014974109 0.0041567663 -0.0004210310 -0.0036407565 -0.0103104330 -0.0086705244 -0.0046700048 -0.0079600480 0.0012703354 0.0003379360 0.0008930953 0.0001960015 0.0010452977 -0.0101409724 -0.0051536663 0.0002945274 -0.0026197246 0.0016281540 0.0008215724 -0.0013167520 0.0001048607 -0.0024301684 0.0011487490 -0.0030484534 -0.0041650192 0.0030315392 -0.0004807012 0.0034590299 0.0043596086 -0.0011044246 0.0036566867 -0.0061146231 0.0020461584 -0.0040299379 0.0069089944 -0.0122482541 -0.0061145449 0.0127407725 -0.0060494977 0.0040112696 -0.0017606412 0.0010060207 0.0006010268 0.0164345889 -0.0151621156 -0.0004676234 0.0087863938 -0.0010588889 0.0076989555 0.0003720535 0.0000658127 -0.0007506996 -0.0006699552 -0.0003321298 -0.0004947551 -0.0002432367 0.0002659959 0.0001479603 0.0005900809 -0.0007258120 -0.0011196611 0.0198823575 0.0338466844 -0.0060216388 0.0455915914 0.0294880600 -0.0225969476 -0.0062470967 -0.0145148905 0.0015718529 -0.0017621259 0.0028152764 0.0013412782 0.1230729573 -0.0473289137 -0.0726656357 -0.0231686283 -0.0239578582 0.0109480599 -0.0161575340 -0.0145198619 0.0068090039 0.0012097009 -0.0149321450 -0.0015350400 -0.1583220695 0.0184693265 0.1055496865 -0.0186231303 0.0545308199 0.0129904928 -0.0412939867 0.0476460485 -0.0260868170 -0.0079137776 0.0431347066 -0.0045444389 0.0141722579 -0.0207071942 0.0080677717 -0.0069155520 -0.0156965933 -0.0020687807 0.1857298568 -0.0399568187 0.1282949187 0.0361792789 0.0456442176 0.0131327797 0.0020986083 -0.0180494666 0.0015201433 0.0014044444 0.0019110845 0.0008024014 -0.1576082830 -0.0042196803 -0.0852252006 0.0154983065 -0.0372082963 0.0112995883 -0.0898843581 -0.0208435614 0.0106430631 -0.0386080933 -0.2132866566 -0.2359489835 0.1857959088 -0.0286244177 -0.1381023038 0.0809252116 0.1406700779 0.0310085410 -0.0854266491 -0.0131673990 0.0349421536 -0.1733928398 -0.1387095340 -0.0571516268 -0.1414641760 -0.1519337002 0.1309341041 -0.2729144025 -0.1987273619 0.0387716647 0.0167868130 -0.0117881815 -0.0083443824 -0.1272501391 0.1131814997 0.0739249086 0.0615536450 0.0669229522 -0.0212366447 0.0500130009 0.0390378005 -0.0137797777 0.0443820409 -0.1095166657 -0.0336184633 -0.0661014592 -0.0819301054 -0.0327515178 -0.0315437456 0.0498383069 -0.0109604976 -0.0395845064 0.0783303737 -0.0184979808 -0.0184365617 -0.0006947193 -0.0068748204 0.1357132051 0.0625001852 0.0636421577 0.0412434752 0.0228210702 0.0219957390 -0.0360380070 0.0399233021 0.0231110187 -0.0013527628 0.0065220815 -0.0054383666 0.0033393621 -0.0068984952 0.0014947314 -0.0004778386 -0.0017868796 0.0048201807 -0.0013232631 -0.0067028800 -0.0021336054 -0.0013886870 -0.0019686613 -0.0002645397 0.0007658389 -0.0000621793 -0.0014475127 -0.0023286436 -0.0021380859 0.0001205971 0.0005032917 -0.0003007637 -0.0009695810 -0.0003077040 -0.0000970607 -0.0001108699 0.0017080372 0.0014469415 0.0002327649 -0.0012318689 0.0010881241 0.0027096519 -0.0036449603 -0.0081809597 -0.0069161821 0.0028144509 -0.0020851015 -0.0066070055 0.0064805138 0.0239716037 0.0101198417 -0.0052862571 -0.0012574347 0.0018890361 -0.0018044651 0.0070531180 -0.0091802705 0.0506421365 -0.0843463540 -0.0015377218 -0.0018460112 -0.0005845688 0.0095102022 0.0002286946 0.0003592822 0.0004585394 0.0001876679 0.0018289159 0.0019689896 0.0002805640 -0.0006075222 -0.0006980220 -0.0009669188 -0.0006801195 -0.0010483627 0.0020532684 0.0014556916 -0.0012037627 0.0178240512 -0.0029203088 -0.0241571130 -0.0047087876 0.0010092331 -0.0057922881 -0.0030854130 -0.0013934207 0.0042125069 -0.0009598480 -0.0038693464 -0.0084742227 -0.0037535010 -0.0036513187 0.0013390978 0.0001929985 -0.0001632271 -0.0006270204 0.0077735620 0.0002488126 -0.0011619046 0.0202767296 -0.0152327748 -0.0050015184 0.0901973477 0.0246867577 -0.0220526831 0.0346883965 0.0014371656 -0.0286857773 0.0059731189 0.0198795675 0.0161753264 0.0009869666 -0.0025857772 -0.0013226977 -0.0012582128 -0.0005743112 0.0013991038 -0.0055120285 -0.0010652783 -0.0012966819 -0.0038562613 0.0014800138 0.0030799243 -0.0669908403 -0.0099943082 0.0340044701 0.0355025033 -0.0029121734 -0.0268611562 0.0035743612 0.0072333063 0.0021619813 0.0054976954 -0.0004813801 -0.0081221577 -0.0008915883 0.0017927738 -0.0007810560 0.0124423233 0.0116991133 0.0107045147 0.0183977047 0.0048543907 0.0014366389 0.0175219352 -0.0078020785 0.0044660786 0.0201840148 -0.0011416952 -0.0122418935 0.0020766021 -0.0100747914 -0.0096204233 0.0059232845 -0.0104917440 -0.0039885155 -0.0663101048 -0.0241667661 0.0099752377 -0.0666330522 -0.0259663300 0.0314604736 0.0344386648 -0.0043676910 -0.0405261030 -0.0217638821 -0.0094937041 -0.0054379924 0.0004472728 0.0023805548 0.0055009544 0.0013361014 0.0040316386 0.0064602877 0.0038174856 -0.0017899481 -0.0061663082 0.0061978594 0.0002114559 -0.0040534509 -0.0093241553 0.0008124674 0.0080260195 0.0205913708 0.0211045486 0.0091461809 0.0188912721 0.0037587287 -0.0073691659 -0.0017102443 0.0001128957 0.0008694394 0.0223863722 0.0109197410 -0.0012606362 0.0019681486 -0.0035176311 0.0008668807 0.0014444113 0.0006612951 0.0047485952 -0.0005659054 0.0040101505 0.0071293423 -0.0041291663 0.0004588538 -0.0047838910 -0.0062348201 0.0018698439 -0.0048921791 0.0087054964 -0.0024616979 0.0067027037 -0.0201477379 0.0285400886 0.0140968125 -0.0195842096 0.0095853321 -0.0068662914 0.0011862948 -0.0003199695 0.0006217554 -0.0179599675 0.0130052213 -0.0009314537 -0.0065197053 -0.0014152546 -0.0037472482 -0.0004317793 -0.0001735613 -0.0000651426 0.0005405007 0.0000770631 0.0004542048 0.0004571515 -0.0002148143 0.0003329612 -0.0001513233 -0.0000092352 -0.0000234824 -0.0453067706 -0.0794412004 0.0134112687 -0.1091674542 -0.0660830677 0.0546557467 0.0157296555 0.0336504034 -0.0042793336 0.0036988221 -0.0059890172 -0.0028342536 -0.2918605522 0.1117664638 0.1716862474 0.0504429048 0.0527759897 -0.0240644617 0.0365131633 0.0334642482 -0.0153087173 -0.0020005629 0.0356298723 0.0031811704 0.3710954304 -0.0442298456 -0.2492119197 0.0467020113 -0.1362053100 -0.0331408144 0.0777030746 -0.0986298600 0.0495300867 0.0169335081 -0.0895839903 0.0095846273 -0.0292630744 0.0425162613 -0.0166210113 0.0154110611 0.0303542837 0.0051845980 -0.3692976125 0.0806550004 -0.2547196730 -0.0661443599 -0.0855351823 -0.0233579356 -0.0031128035 0.0374264242 -0.0024366011 -0.0038311218 -0.0038824407 -0.0021605650 0.3141820594 0.0099192571 0.1697669584 -0.0318195176 0.0737851029 -0.0230441859 -0.0299049073 -0.0059663141 0.0055866717 -0.0111027958 -0.0703219475 -0.0734322414 0.0670007676 -0.0070557547 -0.0448246442 0.0326683647 0.0522292135 0.0148817156 -0.0283416768 -0.0029018496 0.0136337687 -0.0565633533 -0.0509583553 -0.0233241731 -0.0393392599 -0.0486999727 0.0411139411 -0.0960149910 -0.0674611429 0.0098416595 0.0302014319 -0.0123874141 -0.0148253516 -0.4216519807 0.1470447830 0.2158237108 0.0597356719 0.0405900465 -0.0239664576 0.0826381384 0.0012054289 -0.0497834454 0.0533139441 -0.1394389273 -0.0354198150 0.0983655222 0.1182284933 0.0423448053 0.0867579006 -0.0249726864 0.0526592647 0.0516103287 -0.0565388170 0.0245784814 0.0349776504 -0.0062683274 0.0141686179 -0.4723413969 0.0039355872 -0.2223893590 -0.0800248027 -0.0402126045 -0.0245995116 -0.0596874595 0.0616184051 0.0213253407 -0.0108713317 -0.0004332813 -0.0018957409 0.0138631959 -0.0172322243 -0.0098483341 0.0173909005 0.0178093169 0.0155428861 0.0153422489 -0.0003851299 0.0225337883 -0.0466146845 -0.0415497408 0.0188254059 0.0091338956 0.0031112992 -0.0109456515 0.0128745835 -0.0013500629 -0.0230648512 0.0001343157 -0.0015318428 -0.0022811356 -0.0003916153 0.0056996478 0.0091355769 -0.0095954474 -0.0157517842 -0.0061874587 0.0009242657 0.0202415183 0.0224560320 -0.0161214580 -0.0386532013 -0.0281754770 -0.0049718095 0.0085663089 0.0193680463 0.0060372350 0.0163473603 0.0144423360 0.0136128525 0.0046646393 0.0012609743 -0.0119105895 -0.0028130217 0.0007497150 -0.0596755966 0.0377486241 0.0646713813 0.0019458044 0.0011691311 -0.0006852098 0.0015508136 0.0011664789 0.0002057947 -0.0000837814 -0.0000818630 -0.0002517740 -0.0023768498 -0.0026565250 -0.0027235290 -0.0008493945 0.0002573138 0.0036252593 -0.0009072216 -0.0010209237 -0.0016109618 0.0029039024 -0.0000077801 -0.0075672089 -0.0090084238 -0.0052406772 -0.0140951540 -0.0052257982 0.0011256270 0.0119343300 0.0051190343 0.0057651351 0.0094793673 0.0043592767 0.0025102023 -0.0000056069 -0.0107213275 -0.0126204336 0.0003346730 0.0639264592 0.0490888303 -0.0359130442 -0.0351132696 0.0234560265 -0.0079102724 -0.0077130944 0.0023494661 0.0068869200 -0.0038354391 0.0011873026 0.0046390525 -0.0013721270 -0.0049932815 -0.0039165745 0.0014381476 0.0002107675 -0.0003557981 -0.0003717242 0.0014645651 -0.0030556936 -0.0075838544 0.0007631048 -0.0035623006 -0.0093474445 0.0056820066 0.0092162292 0.0085258715 0.0015590287 -0.0039487161 -0.0044941180 0.0001232464 0.0030833769 0.0047471036 -0.0100638584 0.0088651356 0.0007271304 0.0002358804 0.0152358772 -0.0031244567 -0.0071627286 0.0085185249 0.0143024971 0.0000141650 0.0258812845 0.0374580895 0.0019343677 -0.0014448064 0.0164856218 -0.0060023427 0.0166984462 0.0421897794 0.0014713733 -0.0320860473 0.0152312879 -0.0220930057 -0.0454219045 0.0366211946 -0.0358322523 -0.0150026689 0.0079637957 0.0028324015 -0.0009946232 0.0084469151 0.0034187852 -0.0041936770 -0.0059863700 0.0023502547 0.0072818756 -0.0327041155 -0.0116658964 0.0038139010 0.0021649836 0.0039631677 0.0055522984 0.0042948748 0.0059446803 0.0072676097 0.0030109818 -0.0051500615 -0.0118212040 0.0059429806 -0.0019025540 -0.0075557401 -0.0142684014 0.0010504456 0.0106316152 0.0136745261 0.0093047741 0.0100860146 0.0011067812 0.0033573473 0.0146083938 -0.0024771665 0.0002135601 0.0005363000 0.0549375764 0.0269326047 0.0036233079 0.0490161126 -0.0082236968 -0.0377527731 -0.0022531227 -0.0008330803 -0.0051525614 0.0057107801 -0.0084395332 -0.0083422238 0.0062638065 0.0018977811 0.0124202122 0.0069357955 0.0007218268 0.0108772070 -0.0161917680 0.0044977265 -0.0103642671 0.0036945768 -0.0062210257 -0.0092060460 0.0037844806 -0.0071045834 -0.0132818791 -0.0022851780 0.0006519656 -0.0006952242 0.0599002838 -0.0489557526 -0.0100326676 0.0661840043 -0.0111450262 0.0499995652 -0.0008022490 -0.0002519409 0.0002647206 0.0016171181 0.0004894219 0.0011127863 -0.0010253251 0.0005148797 -0.0007244388 0.0008544375 -0.0006905162 -0.0007485677 -0.0348281002 -0.0162413270 0.0178370184 -0.1060876486 0.0294665817 0.0651475903 0.0279708365 0.0011228792 -0.0157359476 -0.0076297329 -0.0102588052 0.0031800880 -0.1206394266 0.0396732681 0.0703430144 0.0245228942 0.0286505497 -0.0110810042 0.0025875429 0.0063480802 -0.0016680248 0.0138739199 0.0348190757 -0.0058510082 0.1477766739 -0.0262182515 -0.0991945313 0.0886799524 -0.2430221391 -0.0690809418 -0.1199933048 0.0045489693 -0.0690032720 -0.0311519273 0.0247194042 -0.0186877972 0.0025415650 -0.0055651818 0.0017403114 0.0020405459 -0.0402472851 0.0053309648 0.1489264079 -0.0230561247 0.1014061987 0.1714598538 0.2121170498 0.0768559938 0.0293358432 -0.0101035595 0.0168912746 -0.0056431369 0.0142517086 -0.0038840183 -0.1309066724 0.0029879204 -0.0702291985 0.0167655735 -0.0443152996 0.0119804036 0.0032541563 -0.0006404421 -0.0024140337 -0.0013117733 0.0073591845 0.0022550823 -0.0123175042 0.0003878517 0.0063245731 -0.0076625587 -0.0103759406 -0.0049196206 0.0022663344 -0.0009181130 -0.0039362295 -0.0021030799 0.0105038288 0.0077771777 0.0009274315 -0.0025703864 -0.0014456111 0.0174559169 0.0073044394 0.0095018512 -0.0008009491 0.0012065692 0.0005283778 0.0154816178 -0.0062164770 -0.0081495300 -0.0023532944 -0.0022188784 0.0008757768 -0.0033838422 -0.0007429376 0.0018981007 -0.0019968416 0.0057628581 0.0011830367 -0.0028487283 -0.0034621965 -0.0013237021 -0.0031428861 0.0001146135 -0.0019130837 -0.0018558409 0.0012394237 -0.0009006174 -0.0013127144 0.0008436804 -0.0004869728 0.0165144772 -0.0009328392 0.0076948705 0.0021245225 0.0011367015 0.0009752602 0.0020998903 -0.0022030817 -0.0008871087 0.0017580731 -0.0051655777 -0.0035418426 -0.0045718970 0.0073482124 0.0048307640 0.0015513303 0.0023343176 0.0014770820 -0.0006735510 -0.0034023928 -0.0065798774 0.0135023354 0.0122806635 -0.0051142291 -0.0026866877 -0.0007494674 0.0034818998 -0.0051958688 -0.0019764239 0.0060398544 -0.0000367596 0.0006887542 0.0009880313 0.0008296051 -0.0011199532 -0.0031455253 0.0032300021 0.0046496604 0.0010159574 -0.0009393000 -0.0067090133 -0.0065879572 0.0037914440 0.0094213459 0.0072287065 0.0003363927 -0.0006626138 -0.0008892704 0.0023366082 0.0021883975 -0.0004926586 -0.0027255394 -0.0006944800 -0.0003879882 0.0025225993 0.0006380107 0.0019797678 0.0122638581 -0.0038299176 -0.0177668640 -0.0021573529 -0.0016126511 -0.0010447614 0.0003815228 0.0000875063 -0.0002169090 0.0008970380 0.0005496229 0.0001538336 -0.0005020256 -0.0004054063 -0.0011432523 0.0010428620 0.0004701613 0.0001143862 0.0002009303 0.0002365673 0.0005794132 0.0034423136 0.0012031677 -0.0059127949 0.0049425870 0.0024963063 0.0064520967 -0.0037501414 0.0016893820 0.0089372988 -0.0014348689 -0.0013700009 -0.0023115662 -0.0020198255 -0.0008337734 0.0001129447 0.0033521130 0.0040532125 -0.0004687426 -0.0155831223 -0.0134080441 0.0095891161 0.0017004412 -0.0010672225 0.0006587068 -0.0081914443 -0.0031551072 0.0021305057 -0.0003175930 0.0018809240 0.0025088656 -0.0006626064 -0.0005301509 -0.0007814096 0.0100144162 -0.0038035958 -0.0108812555 0.0012724225 -0.0156996240 0.0402621367 -0.0144121184 0.0000040809 -0.0034730646 -0.0989484941 0.0584323305 0.0948248315 0.0044123029 0.0002119331 -0.0026075862 -0.0016396195 -0.0000902620 0.0011960047 -0.0663351843 0.0905424270 -0.0929747200 -0.0070458348 -0.0023687149 -0.1597511320 0.0464579038 0.0765303020 -0.1178712743 0.0253886864 0.0192640639 0.0325255610 0.0506407269 0.0030838065 -0.0000218642 0.0402136539 -0.0157028508 0.0130362261 0.4443683023 0.0133328250 -0.3377003847 0.1488154093 -0.2292729401 -0.4540149089 0.3707744328 -0.3748889586 -0.1574298669 -0.0020483633 -0.0010830156 -0.0000101863 0.0034277769 -0.0010996807 -0.0020844951 -0.0105289654 0.0119468293 0.0126241961 0.0006612666 0.0004546327 0.0005090499 -0.0003423832 -0.0003214726 -0.0002506713 0.0001530112 -0.0001176475 -0.0002994610 0.0000068658 0.0002485129 0.0004354674 -0.0002732925 -0.0001056972 0.0000362073 0.0004266160 -0.0001042245 -0.0004743022 -0.0011141343 -0.0005524913 -0.0005520168 -0.0000448116 0.0004364507 -0.0006270766 0.0000353201 0.0000147588 0.0000449650 -0.0009264079 -0.0002788998 -0.0001861376 -0.0000951309 0.0001115142 -0.0001987461 -0.0000172884 0.0000635062 0.0001185498 -0.0002663575 0.0005014234 0.0002784674 -0.0001659421 -0.0003092469 -0.0006911739 -0.0002710989 -0.0001413421 -0.0005750799 0.0008346105 -0.0002337246 0.0005728132 0.0009761893 -0.0008871779 -0.0002316012 -0.0011512094 -0.0004602382 0.0008872563 0.0005054609 0.0000551855 0.0012107923 -0.0038855643 0.0038028961 0.0009219505 -0.0042313412 0.0010095907 -0.0033320481 0.0000405885 -0.0000120893 -0.0000723398 -0.0000638352 -0.0000334582 -0.0000078191 -0.0002179467 -0.0000289700 -0.0011713774 -0.0001266025 0.0001558873 0.0002402692 0.0015832283 0.0012317044 -0.0007283671 0.0041007072 -0.0004137764 -0.0024250811 -0.0010262466 -0.0003144905 0.0005446404 0.0001798626 0.0003921178 -0.0000546753 0.0056605074 -0.0020355480 -0.0033423066 -0.0010208380 -0.0010549821 0.0004738018 -0.0003257562 -0.0004574190 0.0001562473 -0.0003591657 -0.0013921121 0.0001210741 -0.0070794080 0.0010674864 0.0047954630 -0.0031435209 0.0088845907 0.0024445005 0.0041330261 0.0007269270 0.0023269157 0.0011458019 -0.0000288884 0.0006926015 0.0000078832 -0.0001693050 0.0000074757 -0.0001891716 0.0013169027 -0.0002452769 -0.0027640763 0.0001892819 -0.0019726255 -0.0058798497 -0.0071685925 -0.0026619129 -0.0011355252 0.0000296011 -0.0006441467 0.0003181625 -0.0005828938 0.0002118244 0.0022028579 -0.0002375383 0.0011417375 -0.0005236680 0.0015955141 -0.0003936854 0.0026671089 0.0006914503 -0.0008349580 0.0016484478 0.0070238818 0.0089409463 -0.0058888449 0.0001405769 0.0031337588 -0.0019217446 -0.0041530625 -0.0007146408 0.0017208717 -0.0003227422 -0.0015223938 0.0101544206 0.0092060882 0.0059658368 0.0041398416 0.0096272602 -0.0078096338 0.0070549065 0.0028646811 0.0022267786 -0.0072964852 -0.0056400854 0.0023454958 0.0657445185 -0.0131609198 -0.0312285069 -0.0070274049 0.0022463231 0.0035713540 -0.0095752240 0.0077142238 0.0070800172 -0.0060826182 0.0141961087 0.0059644019 -0.0166881122 -0.0222636090 -0.0057762680 -0.0123140091 0.0109189408 -0.0074829444 -0.0063359755 0.0139774280 -0.0031277776 -0.0040325728 -0.0066606331 -0.0022457848 0.0635397107 0.0064661403 0.0312388026 0.0184371772 0.0080802413 0.0018555659 0.0109240300 -0.0109979718 -0.0017186309 -0.0158343108 0.0562522226 0.0383677024 0.0433804993 -0.0735451204 -0.0494765721 -0.0261561941 -0.0339981947 -0.0189024041 -0.0119973073 0.1013012800 0.1329166585 -0.2899002454 -0.2625545367 0.1121393543 0.0597916651 0.0189384313 -0.0741100443 0.1098073480 0.0424114685 -0.1260213797 0.0009984406 -0.0156297542 -0.0233529022 -0.0184779441 0.0231027012 0.0674864646 -0.0676235606 -0.1000780682 -0.0253473164 0.0113442841 0.1343371643 0.1470898767 -0.0862594206 -0.2139250047 -0.1643044276 -0.0089674441 0.0143772962 0.0220515060 -0.0391335983 -0.0271348401 0.0193288733 0.0590380570 0.0143789647 0.0057862439 -0.0416011645 -0.0211558422 -0.0308291327 -0.2788389188 0.1713325233 0.3076575992 0.0439514726 0.0352310541 0.0199689201 -0.0021373429 -0.0013789169 0.0009572131 -0.0151670085 -0.0103615823 -0.0007813480 0.0025708199 0.0069343316 0.0221786201 -0.0188419590 -0.0131806627 -0.0001224218 -0.0057774547 -0.0076186640 -0.0155407001 -0.0745582857 -0.0147915117 0.1239219208 -0.0745712952 -0.0760355568 -0.1093367487 0.0520877022 -0.0082512804 -0.1718340110 0.0297376254 0.0301919767 0.0479904407 0.0390899685 0.0264590759 -0.0077609149 -0.0649665880 -0.0777938077 0.0104810339 0.2983575365 0.2511770466 -0.1991702609 -0.0012062039 -0.0002127056 -0.0040267482 -0.0112462860 0.0123428780 0.0234717309 -0.0092546442 -0.0020530801 0.0048342657 -0.0038095497 -0.0135399823 -0.0089459520 -0.0003440747 0.0030446221 -0.0026582502 0.0026076050 -0.0111976482 0.0245247104 0.0258462540 0.0008015643 0.0130132273 -0.0074242155 0.0038279131 0.0070333929 0.0205993102 0.0058288841 -0.0070825489 -0.0117468022 -0.0012808708 0.0063821575 -0.0434248549 0.0591750811 -0.0645158302 -0.0116800244 -0.0021214504 -0.1010211354 0.0283003093 0.0556001414 -0.0737143914 -0.0653439404 -0.0254336806 -0.0848802298 -0.1155316534 -0.0231031661 -0.0004489896 -0.0809255107 0.0312207042 -0.0599696987 0.0312158725 0.0015538589 -0.0274226868 0.0106426139 -0.0131073628 -0.0325016363 0.0282356535 -0.0281770061 -0.0116268091 0.0252937995 0.0073713249 -0.0027552756 0.0250613332 0.0111269841 -0.0139725249 -0.0169566295 0.0060356174 0.0207287723 0.0095867426 0.0006333131 -0.0080493326 0.0035977332 0.0020029112 -0.0001685575 -0.0046499034 -0.0015973079 -0.0000086276 -0.0022132297 -0.0003193782 0.0011545778 0.0001776359 0.0020301209 0.0036696465 0.0029553502 0.0004803896 -0.0002534171 0.0079073912 0.0030649330 0.0012551667 -0.0009626345 -0.0109841958 0.0035383541 0.0006692273 -0.0001164189 -0.0012841021 -0.0208783267 -0.0096891456 -0.0013332851 -0.0235106351 0.0047919679 0.0195280038 -0.0007810105 0.0011911709 0.0008841779 0.0012341235 -0.0010690827 0.0000785160 0.0009746834 -0.0006166021 0.0003070449 0.0007139281 0.0003586121 0.0018267312 -0.0008685729 0.0010577281 0.0003639773 -0.0078430179 0.0052974228 0.0040270397 -0.0009275207 0.0003236288 -0.0026191058 0.0000032728 -0.0000636978 0.0000850602 0.0066663988 -0.0055560993 -0.0004981558 0.0080169187 -0.0043005940 0.0103424153 -0.0000402950 0.0000800008 0.0007514474 0.0002380623 0.0001266542 -0.0002480993 -0.0001360779 0.0000363610 -0.0004158280 -0.0001649044 0.0003066753 0.0002590201 0.0019150339 -0.0059126829 -0.0020598825 0.0116186706 -0.0123324550 -0.0082842565 -0.0043042237 0.0030267150 0.0028378642 0.0026060011 0.0016287714 -0.0013294377 -0.0002248507 0.0018335431 0.0005920385 -0.0026804239 -0.0047865602 0.0010392352 0.0017680164 0.0025222142 -0.0004597549 -0.0029690550 -0.0038042707 0.0014989042 0.0029625994 0.0021483036 -0.0023861010 -0.0125596404 0.0323761519 0.0097292242 0.0149219146 -0.0065791144 0.0089151305 0.0056791294 -0.0096445880 0.0033324966 -0.0012891939 0.0031901621 -0.0008462577 0.0012203678 0.0057825608 0.0001027803 -0.0308060783 0.0067241543 -0.0211862206 -0.0219709957 -0.0285386876 -0.0094814300 -0.0030148472 0.0034694152 -0.0018136001 -0.0004800010 -0.0020132648 -0.0001874222 0.0271392440 0.0009562822 0.0147575787 -0.0037760741 0.0065848986 -0.0025064831 0.0054597295 -0.0024701746 -0.0067607198 -0.0043549052 0.0036472657 -0.0170364145 -0.0336166560 0.0038260310 0.0191631941 -0.0244538865 -0.0347580888 -0.0074168665 0.0070396797 -0.0043502935 -0.0092329550 -0.0084354346 0.0338536536 0.0312285082 -0.0145576032 0.0105018647 -0.0053493102 0.0201840325 -0.0034140759 0.0198412421 -0.0003419046 0.0016319798 0.0003746967 0.0141745768 -0.0054381985 -0.0074650269 -0.0017598229 -0.0018846617 0.0006257593 -0.0030184173 -0.0007671582 0.0018237064 -0.0012290016 0.0048538151 0.0008332290 -0.0038284119 -0.0052453229 -0.0016955997 -0.0049238632 0.0000596857 -0.0027910088 -0.0025947460 0.0016600178 -0.0012748422 -0.0020511211 0.0010794806 -0.0007915646 0.0242874968 -0.0015039168 0.0115482721 0.0037932994 0.0018519345 0.0012160103 0.0022236298 -0.0023286336 -0.0004730049 -0.0000928967 -0.0018978616 -0.0016306775 -0.0014445328 0.0023289430 0.0016052173 0.0005063401 0.0007553081 0.0017476411 -0.0028691179 0.0128000941 0.0128970210 -0.0315105871 -0.0281860739 0.0128108121 0.0068375081 0.0026351027 -0.0077937630 0.0098546620 0.0011708406 -0.0147880801 -0.0001148111 -0.0016471837 -0.0021450890 -0.0012120635 0.0032212994 0.0068423457 -0.0065034860 -0.0109203444 -0.0041232169 -0.0005732729 0.0123670375 0.0162501905 -0.0109006989 -0.0257987374 -0.0191042547 -0.0020420942 0.0036852139 0.0077217632 0.0024063238 0.0116527646 0.0089570463 0.0059301153 0.0022669248 0.0019633475 -0.0039848910 -0.0008485742 -0.0015928933 -0.0227601301 0.0127897699 0.0279066147 0.0019544435 0.0013713143 0.0013672878 0.0003984972 0.0003662856 0.0003915596 -0.0006756021 -0.0003682369 0.0002565449 -0.0005567646 -0.0004307251 -0.0003308261 -0.0004925169 -0.0004095166 0.0001864887 -0.0003516515 -0.0004259732 -0.0009332181 -0.0008861805 -0.0004472651 0.0005979528 -0.0034187309 -0.0036837696 -0.0053909244 0.0000582499 0.0003098037 -0.0024937516 0.0014215179 0.0014196559 0.0022028810 -0.0004375624 -0.0001787176 0.0005477096 -0.0054779731 -0.0068288197 0.0009285850 0.0270199238 0.0243370896 -0.0204644211 0.0018791285 -0.0014004090 0.0005462116 -0.0036808317 -0.0001456506 0.0010598622 0.0028407394 0.0056812887 0.0035597888 -0.0005681466 -0.0002123455 -0.0031003131 0.0049601346 -0.0054521902 0.0106315707 -0.0158316326 0.0591390502 -0.1305234872 -0.0194747559 -0.0004966153 -0.0124158285 -0.0263953333 0.0163016304 0.0217893126 -0.0003951957 -0.0012836688 -0.0008269569 0.0010138238 0.0002008345 -0.0001302188 0.2282531084 -0.3294572893 0.3503034919 0.0772687412 0.0086660272 0.5667042114 -0.1458430807 -0.3129887772 0.3903736180 0.0433410120 0.0181603176 0.0584683098 0.0652769330 0.0190160545 -0.0020841758 0.0533049665 -0.0213083712 0.0458609629 0.1291493355 -0.0007841432 -0.0825259425 0.0379683444 -0.0715202428 -0.1203413051 0.1051639135 -0.0985022144 -0.0445791598 -0.0072851728 -0.0015115746 0.0031935117 -0.0042710593 -0.0000169151 0.0030109469 -0.0037393227 0.0065674247 0.0035851035 0.0000484310 0.0003591300 0.0009608283 -0.0002506290 -0.0002482283 -0.0002483873 0.0003237752 0.0000415335 -0.0002385667 -0.0000497118 0.0000910763 0.0001548135 -0.0002687764 -0.0002321616 -0.0001971502 0.0001883125 -0.0001034300 -0.0002986496 -0.0016705508 -0.0008289450 -0.0006565323 -0.0008350525 -0.0004827471 0.0011589085 0.0000832111 0.0000351598 0.0000277616 0.0009111962 0.0005782467 0.0000639859 0.0021362419 0.0001532436 -0.0022370275 -0.0000235111 0.0005228333 0.0008973816 -0.0003922541 0.0007862042 0.0007107097 -0.0008985146 -0.0004861169 -0.0024549428 -0.0003339588 0.0000393737 -0.0004819818 0.0013766637 -0.0003211981 0.0009906695 0.0021703084 -0.0020731218 0.0002499693 0.0051816232 -0.0023204700 0.0069032872 -0.0005608019 -0.0013264890 -0.0052538379 -0.0056085464 0.0034026258 0.0015695300 -0.0088021029 0.0020202529 -0.0066266071 0.0000008640 -0.0000055272 0.0000349202 -0.0000648896 -0.0000501369 -0.0000771857 0.0011076603 0.0000293604 0.0041535558 -0.0003564053 0.0008026351 0.0004602360 0.0012321569 0.0006748659 -0.0006147566 0.0028194659 -0.0006295142 -0.0017577833 -0.0008453676 -0.0001433946 0.0004697225 0.0001558570 0.0003768343 -0.0000467263 0.0032669112 -0.0012128163 -0.0019762308 -0.0006175965 -0.0005235489 0.0002690244 -0.0000954330 -0.0002045351 0.0000796302 -0.0002336890 -0.0010930212 0.0000578478 -0.0036910480 0.0005941120 0.0022544061 -0.0024383027 0.0071271429 0.0019340777 0.0051575686 0.0015859899 0.0028662100 0.0022112296 0.0004885563 0.0012705125 0.0000265650 -0.0005269553 -0.0000061825 -0.0001758190 0.0017800162 -0.0002682921 -0.0004626757 -0.0004173308 0.0001663832 -0.0077533912 -0.0096192822 -0.0036019723 -0.0015652293 -0.0001395736 -0.0008869380 0.0003549934 -0.0011298031 0.0002720166 0.0000604431 -0.0002486367 -0.0000629203 -0.0012447199 0.0029748512 -0.0008532811 0.0014198913 -0.0004824556 -0.0006194574 -0.0004036491 0.0035636982 0.0021005381 -0.0031956656 0.0025350053 0.0047432037 -0.0011752183 -0.0025950750 -0.0013530081 0.0012878670 0.0019484320 0.0000920028 -0.0052176846 -0.0129577812 -0.0145310862 -0.0009415254 -0.0188155894 0.0138867823 0.0115749852 0.0175208801 -0.0102677587 0.0538801841 0.0700805122 -0.0148870939 -0.2477076915 0.0122938714 0.1141200510 0.0310161737 -0.0446407701 -0.0210485949 0.0383146205 -0.0746748349 -0.0255779468 0.0283910608 -0.0323413310 -0.0167458660 -0.0293766292 -0.0163121309 -0.0144418578 -0.0572499104 -0.0632742062 -0.0247672777 -0.0431259547 -0.0400415707 -0.0208055604 -0.0238290757 0.0862855779 -0.0101667155 0.2120236720 -0.0739691795 0.0920408765 0.0204041260 0.0047616291 0.0091397766 -0.0218968592 0.0152282751 0.0103454105 0.0003991462 -0.0022224505 -0.0032601782 -0.0016311293 0.0022847184 0.0034906950 0.0009323724 0.0012857389 0.0035680408 0.0012970779 0.0062420135 0.0087262134 -0.0221853740 -0.0195632127 0.0092605102 0.0045872376 0.0018380484 -0.0050910947 0.0044109282 -0.0016762468 -0.0099364893 0.0002548072 -0.0004183354 -0.0010343440 -0.0000366083 0.0024347716 0.0037327039 -0.0038854598 -0.0070329919 -0.0035337917 -0.0010752245 0.0075731894 0.0112092089 -0.0091853366 -0.0212733499 -0.0156139387 -0.0030748247 0.0044648318 0.0104827561 0.0071782081 0.0167204178 0.0112895078 0.0056663878 0.0023214137 0.0011174651 -0.0040391057 -0.0007853552 0.0004279960 -0.0194540722 0.0123912785 0.0210216038 0.0000803302 -0.0001543480 -0.0002290731 0.0004622979 0.0003414140 0.0003658508 0.0000011881 -0.0000476227 -0.0000371274 -0.0007750911 -0.0006378645 -0.0012907897 0.0001145478 0.0003211276 0.0007186677 -0.0002356520 -0.0002516825 -0.0003248192 0.0019414723 0.0000337555 -0.0044734401 0.0003976868 -0.0015907693 -0.0008621501 -0.0016820508 0.0002407467 0.0050623081 0.0008455663 0.0011863275 0.0018035630 0.0003794401 0.0003439955 0.0004373343 -0.0031436606 -0.0039377972 0.0002275453 0.0193006361 0.0140979442 -0.0129498110 0.0656415478 -0.0141515211 0.0983344292 0.0010704144 0.0005546143 -0.0004724464 0.0003579604 0.0002755145 0.0000870175 0.0000554948 -0.0000284751 0.0000788839 -0.0004254349 0.0001911385 -0.0004845725 0.0008098344 -0.0021960429 0.0050763017 0.0005555259 0.0002174484 0.0008022491 0.0017126136 -0.0009446028 -0.0012959788 -0.0008397294 -0.0001149010 0.0004164254 0.0004332638 0.0000389680 -0.0003016671 -0.0096467099 0.0120406620 -0.0141870818 -0.0037520822 -0.0002663943 -0.0208666528 0.0061328275 0.0114334346 -0.0153146567 0.0003706185 0.0010215837 -0.0008718922 -0.0020061659 -0.0045908444 -0.0008855069 -0.0001770412 0.0006015023 -0.0051275126 -0.0078132475 0.0000596440 0.0051935467 -0.0021204546 0.0038285240 0.0071027940 -0.0066926537 0.0060069909 0.0026984299 -0.0007475214 -0.0002693760 -0.0002588542 -0.0005737004 -0.0007083676 0.0002139516 0.0007794611 -0.0004512172 -0.0008767962 -0.0706424616 -0.0016533732 0.0750950640 -0.0182920716 -0.0094005624 -0.0029937959 0.0353464010 0.0148111598 -0.0021695767 0.0087195416 -0.0056596580 -0.0182844363 -0.0054452740 -0.0186400948 -0.0299845670 -0.0229360901 -0.0031732753 0.0054785720 -0.0962921768 -0.0572668507 -0.0181603733 -0.0524309579 0.0163203593 0.0802794309 -0.0014708229 0.0014672189 0.0020167088 0.2014754386 0.0965986729 0.0215939824 0.2502584676 -0.0192792484 -0.2221862094 0.0131893617 -0.0104894630 -0.0019811984 -0.0443747261 0.0286955871 -0.0095230168 -0.0128056083 -0.0097856742 -0.0383830963 0.0130264802 -0.0276467416 -0.0353785156 0.0266722273 -0.0086786323 0.0085859312 0.1993751106 -0.1900970430 -0.0756471983 0.1404387173 -0.0306001608 0.1524187298 0.0019440904 0.0018719701 0.0031213970 -0.2565256380 0.2218172107 0.0776338454 -0.3646408946 0.0940613486 -0.2959081885 -0.0019013554 -0.0003914203 0.0031741624 -0.0006153970 -0.0005826905 -0.0012716426 0.0037064129 -0.0014150438 0.0049026612 -0.0009770028 0.0001606545 -0.0005177354 -0.0080596079 0.0559687111 0.0130262525 -0.0464985314 0.0790029484 0.0341945142 0.0189140207 -0.0248574577 -0.0138335135 -0.0174232372 -0.0122103085 0.0089312575 0.0707212736 -0.0377889333 -0.0461734737 0.0260977977 0.0404466661 -0.0107059185 -0.0106123059 -0.0216931307 0.0033065058 0.0157992101 0.0159683700 -0.0082168517 -0.0771059134 -0.0055780034 0.0551449617 0.0536633954 -0.1294144052 -0.0428336584 0.0619011610 0.0628810632 0.0304525021 0.0203844499 0.0556380739 0.0121513923 0.0044612790 -0.0265343410 0.0036342740 -0.0100996792 0.0184078007 -0.0074861683 0.0933949611 -0.0361840230 0.0716394507 -0.0867052647 -0.0990324389 -0.0431704128 -0.0256908868 -0.0179374885 -0.0140578257 0.0137339826 -0.0165343824 0.0089863063 -0.0836446372 -0.0125338756 -0.0485243639 -0.0082614312 0.0403169604 -0.0065336951 -0.0001724931 -0.0001395243 0.0000717005 -0.0004400417 -0.0006521496 -0.0016023404 -0.0000500252 0.0005525668 0.0007021128 0.0001733754 -0.0000450228 0.0003840621 -0.0001005723 -0.0001314208 -0.0001066766 -0.0018426133 0.0002964368 0.0007597143 -0.0011586444 -0.0002953120 0.0005549783 -0.0011772647 -0.0017062627 0.0012299296 -0.0007297297 0.0018564518 0.0008066961 0.0279603502 -0.0088694627 -0.0151623924 -0.0034783680 -0.0020762271 0.0015070466 -0.0064827416 0.0002947538 0.0040086720 -0.0033992172 0.0081705519 0.0000674105 -0.0018703123 -0.0050481352 -0.0021129919 -0.0058058130 0.0020063324 -0.0035221322 -0.0019416722 0.0042809387 -0.0009859759 -0.0038173527 -0.0014811466 -0.0002552148 0.0335107307 0.0002151464 0.0157829070 0.0000999313 0.0017413157 0.0043074307 0.0012392702 -0.0009202850 -0.0007826030 0.0123342875 -0.0496027770 -0.0360681765 -0.0389355352 0.0647386662 0.0437477329 0.0164884318 0.0261188653 0.0244072486 0.0597181377 0.0486446164 0.0341175086 -0.1719240674 -0.1394515492 0.0874791207 0.0228430266 0.0129718565 -0.0198568618 -0.0554480013 -0.1377758186 -0.0997047646 0.0036584970 0.0208152637 0.0260172633 0.0395749249 0.0403264838 -0.0139101796 -0.0026542398 -0.0443857547 -0.0544553251 -0.0200369438 0.0139785101 0.0474339257 -0.1083389387 -0.2122535047 -0.1355823652 -0.0797966506 0.1229285246 0.3267475713 0.2311440396 0.5103254768 0.2684465457 0.0468867661 0.0559929773 0.0532127331 -0.0380907473 0.0141550251 0.0490659608 -0.0642620275 0.0422451726 0.0686222807 -0.0511083647 -0.0551305105 -0.0417677411 0.0023434424 0.0027868216 0.0053349484 0.0165483390 0.0082241791 -0.0140031220 -0.0050169333 -0.0073834711 -0.0312652491 0.0307825405 0.0200356209 -0.0054498986 0.0012852396 0.0070642155 0.0236091208 0.0742925110 0.0100499613 -0.1382482550 0.1245336796 0.1025707414 0.1794138515 -0.0661550536 0.0139525741 0.2310175467 -0.0303006767 -0.0275902900 -0.0311184976 -0.0463953320 -0.0287666292 0.0168033624 0.0027917760 -0.0014548725 -0.0025608536 0.0830937623 0.0609512630 -0.0616850392 0.0019882611 -0.0072845359 -0.0119567048 -0.0012588322 -0.0030218212 -0.0015810063 0.0009236082 0.0016261562 0.0030010555 -0.0001859186 -0.0001763540 -0.0003541248 0.0014103886 0.0000401189 -0.0002842174 0.0011569926 -0.0055224731 0.0121685518 -0.0328785052 -0.0021902814 -0.0164098601 0.0063673178 -0.0034320975 -0.0054423651 -0.0015479435 -0.0007036078 0.0001486120 0.0009959168 0.0007385737 -0.0007415389 -0.0201866401 0.0348227766 -0.0329403027 -0.0060698878 -0.0005641192 -0.0591135286 0.0128320406 0.0312764467 -0.0367188579 0.0864703418 0.0389962974 0.1081918029 0.1482682538 0.0375667357 0.0035498681 0.1066459457 -0.0418336714 0.0791077705 -0.0323812078 0.0000060191 0.0239449823 -0.0091882125 0.0160825963 0.0285730538 -0.0250712569 0.0256917217 0.0113943300 -0.0020947790 0.0001128586 0.0010919448 -0.0012622834 -0.0028576676 0.0001842136 0.0040120252 -0.0032549358 -0.0030481872 0.0015140475 0.0009824048 0.0001389646 -0.0012578334 -0.0010003704 -0.0008658388 -0.0000618395 -0.0008295008 -0.0005534004 -0.0006695043 0.0015183037 0.0025059801 -0.0008898183 -0.0001410258 0.0003270620 0.0018913051 -0.0001617236 -0.0016955232 0.0063572649 0.0039064903 0.0005799673 0.0020968899 0.0034039882 -0.0067152349 0.0016853222 0.0000989377 0.0015128680 -0.0061349934 -0.0044356440 -0.0006227798 -0.0051616016 -0.0004970109 0.0048468666 0.0003134904 -0.0001290440 0.0005520952 0.0054216666 -0.0010754288 0.0055406082 -0.0007047581 0.0026710664 0.0046829238 -0.0061514498 0.0046830862 0.0003631945 0.0013361713 -0.0008830463 0.0008086575 -0.0410000124 0.0416423866 0.0174262128 -0.0341518948 0.0104033679 -0.0264851885 -0.0004654378 0.0005312694 0.0011794086 0.0278111543 -0.0262783295 -0.0146969892 0.0373414809 -0.0127114079 0.0301609986 0.0000929604 0.0002147489 -0.0000164830 -0.0012778760 -0.0005767826 -0.0012732498 -0.0002724699 0.0001202124 -0.0005838451 0.0008195863 -0.0010814702 -0.0011608874 0.0015327092 0.0001632672 -0.0009191742 0.0064647135 -0.0029261964 -0.0040484717 -0.0020345635 0.0004370102 0.0012387487 0.0007010122 0.0006135321 -0.0003332680 0.0059429065 -0.0016174730 -0.0035577757 0.0002185185 0.0002000499 -0.0002548784 0.0004259706 0.0000112268 -0.0001864962 -0.0008890983 -0.0025142549 0.0003517042 -0.0076721869 0.0018041395 0.0046421777 -0.0059377983 0.0163394211 0.0047131061 0.0056096946 0.0006505641 0.0032604603 0.0035057065 -0.0008010739 0.0018062753 -0.0004820512 0.0000984260 -0.0003100710 0.0001232393 0.0019141022 -0.0001159841 -0.0028436600 0.0004277497 -0.0021885768 -0.0072153492 -0.0089931717 -0.0032481200 -0.0012097113 0.0001443590 -0.0006380997 -0.0000986332 -0.0013477783 0.0000334414 -0.0005504275 0.0000886322 -0.0006604272 -0.0024478543 0.0048562613 -0.0017979509 0.0008643977 -0.0000104164 -0.0022265398 -0.0022021467 0.0095447925 0.0090570814 -0.0089395925 0.0026317060 0.0057783055 0.0059623186 0.0002654449 0.0038694089 0.0047275608 0.0025251887 -0.0038131526 -0.0154163823 0.0029966645 0.0014433021 -0.0122814212 -0.0044974385 0.0107343852 -0.0023009554 -0.0114560802 0.0106881183 -0.0204985731 -0.0370631818 0.0070744916 0.0817471370 0.0070483003 -0.0347082186 -0.0123481625 0.0256092446 0.0088143730 -0.0113413251 0.0383155479 0.0079084151 -0.0040460540 0.0108621858 0.0029691749 0.0094509455 -0.0035581428 0.0067714947 0.0252550932 0.0139351693 0.0122726046 0.0111498461 0.0010276490 0.0082574656 0.0289614223 -0.0222313360 -0.0008063205 -0.1177546167 0.0169353697 -0.0608173872 -0.0071627050 -0.0021408989 -0.0038226990 0.0055831881 -0.0027722516 -0.0025683868 -0.0003126074 0.0003939124 0.0006856701 0.0005515048 -0.0005306848 -0.0008349102 0.0000638054 0.0001150997 -0.0004986696 0.0080945242 0.0000344805 -0.0010652054 -0.0078234466 -0.0052801697 0.0051293308 -0.0004269623 0.0001237986 0.0008649126 -0.0104231573 -0.0170691596 -0.0062091205 0.0004215532 0.0032804535 0.0043623282 0.0053261796 0.0036076061 -0.0047125579 0.0023620773 -0.0008342791 -0.0043790928 -0.0009342874 -0.0024958926 -0.0019959616 -0.0078242732 -0.0129028077 -0.0068809065 -0.0082832926 0.0130305885 0.0359271797 0.0239401508 0.0553772160 0.0265965113 0.0013167059 0.0059457799 0.0066359956 -0.0019503707 0.0025197994 0.0053105429 0.0071915679 -0.0059998460 -0.0065531309 -0.0059387673 -0.0065633917 -0.0049702459 -0.0004371747 -0.0002322943 0.0003212020 0.0019650119 0.0009814258 -0.0020905032 0.0003809923 -0.0001741195 -0.0021465855 0.0033695902 0.0020852427 -0.0013491507 0.0003630644 0.0010828774 0.0031658540 0.0061905129 0.0007044838 -0.0103612355 0.0133295865 0.0144473172 0.0213689629 -0.0054355480 0.0008234725 0.0216249310 -0.0037041844 -0.0037574343 -0.0041607359 -0.0042536759 -0.0024784675 0.0011907333 0.0018892124 0.0017759440 -0.0005907181 -0.0002431354 -0.0000484297 0.0007937345 -0.0221139484 0.0657070823 0.0803824469 -0.0010311375 -0.0015055845 -0.0005174885 0.0010165129 0.0002974546 -0.0001963316 0.0001605691 0.0006291642 0.0002985599 -0.0012988865 -0.0000506900 -0.0003937684 0.0003555301 0.0007650779 -0.0013385549 0.0141157118 0.0015898403 0.0078017855 -0.0008177193 0.0006199139 0.0011270316 -0.0004898427 -0.0002570541 0.0000417111 0.0002703564 0.0000062866 -0.0001997206 0.0010453243 -0.0062812547 0.0031580107 -0.0011780911 0.0001529902 0.0094365626 -0.0008686923 -0.0046853159 0.0046050019 -0.0351307614 -0.0187711941 -0.0415329166 -0.0604006512 -0.0259332247 -0.0041232147 -0.0461135895 0.0191550904 -0.0402465183 0.0057657626 0.0002613014 -0.0050726043 0.0021773928 -0.0036295160 -0.0055437468 0.0036324726 -0.0052780547 -0.0023355725 -0.0011241069 -0.0001915530 0.0008965768 -0.0011123773 -0.0001193635 0.0006149911 -0.0001767824 0.0005438266 0.0006250817 0.0256792233 -0.0153454381 -0.0567069658 0.0059834715 0.0037840415 0.0019202152 -0.0255874499 -0.0057433029 0.0106805313 -0.0022798379 0.0085175524 0.0187006340 0.0164161930 0.0153564872 0.0149107617 0.0097330345 0.0015170397 -0.0016791009 0.1404258496 0.0825490782 0.0329514570 0.1021941528 -0.0090598178 -0.1027805336 0.0009358887 -0.0017984328 -0.0015338492 -0.1612223397 -0.0845245570 -0.0312070397 -0.2016383442 0.0088071362 0.1772149302 -0.0144164884 0.0123729718 0.0057014686 -0.0390913737 0.0084235843 -0.0407282938 0.0025744910 -0.0276107322 -0.0533145188 0.0501083676 -0.0382052574 -0.0011923721 -0.0035703458 0.0043945242 0.0017027090 0.3597373768 -0.3420088922 -0.1496700565 0.3105459665 -0.1001803973 0.2506783995 0.0012635433 0.0030676741 0.0026974537 -0.2266935610 0.2241175997 0.1212491683 -0.3242076676 0.1051262738 -0.2561273818 0.0013662510 0.0004311367 -0.0019512381 -0.0010530810 0.0000045202 -0.0000526894 0.0026873811 -0.0015514064 0.0025151557 -0.0055257775 0.0041316557 0.0042522515 0.0002680479 -0.0270456135 -0.0044999577 0.0104658976 -0.0319941670 -0.0089605937 -0.0075356180 0.0097288792 0.0055589939 0.0087959904 0.0057631437 -0.0045439985 -0.0357231072 0.0166232750 0.0227703973 -0.0124667308 -0.0202926532 0.0048644916 0.0033085983 0.0120143591 -0.0003232545 -0.0044814513 -0.0053391911 0.0022186024 0.0571435539 -0.0006118147 -0.0400977218 -0.0151416435 0.0369428211 0.0123362733 -0.0272813321 -0.0195619698 -0.0141745431 -0.0246791231 -0.0135977056 -0.0125867325 -0.0005818103 0.0042762320 -0.0003951428 0.0045042912 -0.0071698442 0.0032924660 -0.0230582862 0.0062023203 -0.0176684349 0.0309049201 0.0317358959 0.0150672693 0.0049975669 0.0088199698 0.0023349098 0.0006345484 0.0096630028 -0.0004029555 0.0675057915 0.0037598492 0.0387138319 0.0196258867 -0.0391734440 0.0138649406 0.0000760630 0.0001721939 -0.0001790104 0.0002903994 0.0015777107 0.0029705034 -0.0002877324 0.0007214618 0.0006560170 0.0017766596 0.0008500233 0.0012872450 0.0006151879 0.0009517365 0.0001012338 -0.0013853377 -0.0016551965 -0.0019809070 0.0024046936 -0.0017685430 0.0004282028 0.0003284643 0.0003092893 0.0006746443 -0.0040518660 -0.0047779568 0.0019266422 0.0331402812 -0.0052635389 -0.0163997141 -0.0045197131 0.0026196221 0.0024770155 -0.0064353551 0.0067997492 0.0039561750 -0.0023453986 0.0082042495 -0.0000970834 0.0021928386 -0.0027273270 0.0002890415 0.0010451339 0.0016019032 0.0001732150 0.0007587622 0.0013373511 0.0008502120 0.0024225108 -0.0031525316 -0.0004895656 -0.0005758641 0.0016330116 -0.0013178668 -0.0033470246 0.0000980957 0.0026224120 0.0012084036 -0.0005274625 -0.0009262768 0.0106850340 -0.0471460456 -0.0343810830 -0.0360471868 0.0587983955 0.0396952696 0.0202152310 0.0276932773 0.0246370117 -0.0469094726 0.0244522218 0.0213543883 -0.0048575941 -0.0106462777 -0.0049079241 0.0130178427 0.0059395510 -0.0134052585 0.0607265391 0.0798815768 0.0082434412 -0.0030126870 -0.0194651218 -0.0244182011 -0.0264891500 -0.0112372959 0.0321297884 -0.0180211158 -0.0129267870 0.0112993026 -0.0040540061 0.0211604932 0.0342940559 0.0196550087 0.0226004727 0.0043684052 0.0352675168 -0.0541952133 -0.1485722912 -0.1071722854 -0.2218559616 -0.1102844910 0.0073498710 -0.0259462712 -0.0311526456 0.0021035109 -0.0116889048 -0.0190520640 -0.0747137573 0.0620288607 0.0751032909 0.0204698031 0.0256250754 0.0222876297 0.0073338918 0.0052070501 -0.0005754427 -0.0073188826 -0.0024852393 0.0137377611 -0.0078727086 -0.0056051892 -0.0032275968 -0.0117072017 -0.0065558950 0.0099710915 -0.0015013363 -0.0047472599 -0.0148846725 -0.0007213445 0.0023497105 -0.0076576362 -0.0457957246 -0.0630304187 -0.0837103067 0.0025803016 -0.0000351172 -0.0377921149 0.0132585755 0.0121819528 0.0111340184 -0.0018254008 -0.0033644192 0.0010907136 -0.0118285047 -0.0119897157 0.0037519261 0.0315518018 0.0209133391 -0.0313780797 -0.0019570672 0.0069140767 0.0079634411 0.0085863792 0.0085531519 -0.0010319694 -0.0050674411 0.0002560557 0.0031867759 -0.0006312888 -0.0031565783 -0.0013998515 0.0086634093 0.0002738322 0.0021080884 -0.0006150540 -0.0069422966 0.0154021420 -0.1149713960 -0.0106837560 -0.0594514438 0.0094203988 -0.0061203792 -0.0103709756 -0.0006053894 0.0005532843 0.0009082498 0.0004248168 0.0005114271 0.0001425182 -0.0255006473 0.0508988346 -0.0428338651 -0.0009563121 -0.0007207004 -0.0823209668 0.0181556100 0.0411717698 -0.0554335640 0.3012242099 0.1574434446 0.3577345038 0.4930578024 0.1574565953 0.0195329579 0.3761713587 -0.1502105489 0.2870179288 -0.0572408968 -0.0019288554 0.0487332713 -0.0192078872 0.0319130040 0.0527537737 -0.0403331959 0.0510635791 0.0229105901 0.0028478054 0.0001368743 -0.0057829899 0.0036326667 -0.0025245431 -0.0021789842 0.0056032750 -0.0060073036 -0.0089332203 0.0042247439 -0.0031016631 -0.0103405834 0.0016428915 0.0005935883 0.0002963917 -0.0053516730 -0.0006813797 0.0023110508 -0.0003933444 0.0016481881 0.0038655883 0.0031791033 0.0028964364 0.0026252697 0.0020977730 0.0001302644 -0.0007872838 0.0270181486 0.0176283534 0.0053958035 0.0232079767 -0.0067513184 -0.0184866042 -0.0016507490 -0.0008829006 -0.0005274238 -0.0311180485 -0.0172501529 -0.0060002242 -0.0362994314 0.0012964728 0.0318713690 -0.0040929941 0.0038418658 0.0020415721 -0.0033065463 0.0014999720 -0.0032343669 0.0003451683 -0.0052199590 -0.0096115147 0.0051363999 -0.0045357438 -0.0010662528 0.0019532170 -0.0003515807 0.0022279885 0.0432049297 -0.0406685228 -0.0174093230 0.0441838224 -0.0182874901 0.0419067479 -0.0025639239 0.0035914458 0.0037507116 -0.0276140342 0.0275429435 0.0132963910 -0.0514730771 0.0162281170 -0.0408261194 0.0006210660 0.0000978514 -0.0017776030 0.0009544441 0.0005783782 0.0013473110 0.0009908592 -0.0002568535 0.0011933204 0.0005608686 -0.0019050514 -0.0026718053 0.0015447953 -0.0045859758 -0.0016270786 0.0052312606 -0.0070183080 -0.0036716384 -0.0025097056 0.0017408308 0.0016772505 0.0019600621 0.0016877410 -0.0009656962 -0.0034941725 0.0019294509 0.0023656907 -0.0029930437 -0.0042974346 0.0011683770 0.0005129513 0.0022185406 0.0000377296 -0.0010085459 -0.0025490478 0.0004040345 0.0071383501 0.0006074594 -0.0056742343 -0.0056561434 0.0153932209 0.0046552102 -0.0022274043 -0.0013757097 -0.0010406348 -0.0018995726 -0.0011122922 -0.0009596651 -0.0003269883 0.0001060827 -0.0002417840 0.0006834420 -0.0004389512 0.0004513610 0.0007270694 -0.0000816347 0.0004283198 0.0020064688 0.0014203553 0.0010386555 0.0001586639 0.0010683387 0.0000389685 0.0001832734 0.0005721972 0.0000530488 0.0060990186 0.0006243833 0.0034714909 0.0014902813 -0.0027138073 0.0010596582 -0.0006384024 -0.0009840181 0.0018061310 -0.0027184808 -0.0089115423 -0.0183931390 0.0028395655 -0.0033532979 -0.0029605436 -0.0082144446 -0.0022597994 -0.0071031632 -0.0033907810 -0.0051870419 -0.0005903162 0.0035352107 0.0042167874 0.0068853959 -0.0214394408 0.0063894830 0.0049298366 -0.0056911348 -0.0036037709 -0.0068730902 0.0427538378 0.0130557702 -0.0035740584 -0.1400556563 0.0292328203 0.0739055654 0.0120564210 -0.0039912584 -0.0095438460 0.0207168056 -0.0252721750 -0.0120778177 0.0082039747 0.0032127710 -0.0056213045 -0.0016962637 -0.0024666446 -0.0021884337 -0.0279395336 -0.0332150654 -0.0109671072 -0.0198396301 -0.0160132407 -0.0110362537 -0.0223678232 0.0423191507 -0.0032107980 0.1077390089 -0.0324517021 0.0506085373 0.0043524121 0.0000886004 0.0015800361 -0.0048119091 0.0034574867 0.0027963655 -0.0016170219 0.0057121262 0.0040051354 0.0047641301 -0.0078008828 -0.0049669117 -0.0021047059 -0.0030340762 -0.0024230938 0.0020157613 -0.0036198291 -0.0000852464 0.0030197255 0.0031102042 -0.0007198325 -0.0014548543 -0.0004883988 0.0016037353 -0.0027597996 -0.0013603828 0.0021456104 0.0002323883 0.0007976900 0.0009580298 0.0007543848 -0.0001802590 -0.0021949023 0.0016582182 0.0013524118 0.0004587042 0.0005172025 -0.0018358586 -0.0032305599 0.0010614444 0.0031299724 0.0024984410 -0.0002066105 0.0003154030 0.0044401343 -0.0042006717 0.0056503918 -0.0030852980 -0.0009739175 0.0002936038 0.0004492131 0.0002842986 -0.0003202233 -0.0008638694 0.0029869524 -0.0027227465 -0.0043882049 0.0013668318 0.0009982315 0.0002677294 -0.0005422814 -0.0003995432 -0.0002695099 -0.0002258971 -0.0001966991 -0.0003829078 0.0006888217 0.0008849499 0.0017511048 -0.0006990949 -0.0005720922 -0.0002367850 -0.0001688184 -0.0001270129 -0.0001986273 -0.0040272679 -0.0004809823 0.0079928908 -0.0027916627 -0.0017092020 -0.0034679953 0.0032278803 -0.0002060193 -0.0099966266 0.0011323621 0.0007983711 0.0018509739 0.0016159389 0.0011962013 -0.0008235384 0.0006141781 0.0008744322 -0.0002282765 -0.0019594413 -0.0034318008 0.0034744221 0.0307953812 -0.0345361615 -0.0059390472 -0.0002744194 0.0001237180 0.0006869517 -0.0004091147 -0.0003594754 -0.0001484157 -0.0000697032 -0.0001835377 -0.0001036565 0.0002848502 0.0000494234 0.0001538381 -0.0001267503 0.0000604176 -0.0002681632 -0.0017803377 -0.0004497061 -0.0011002088 -0.0001939040 0.0000356536 0.0000250105 0.0006362147 0.0001738051 -0.0002139005 -0.0003565776 -0.0000386376 0.0001959129 0.0005740862 -0.0003253399 0.0007233616 0.0003524964 -0.0000299048 0.0007650171 -0.0003502227 -0.0001951237 0.0004408329 0.0044074310 0.0038748230 0.0036646867 0.0062408419 0.0058119222 0.0012590792 0.0067070017 -0.0030227222 0.0061547821 0.0004926688 -0.0000889047 -0.0001536749 -0.0000746342 0.0000693372 -0.0001887420 0.0006490485 -0.0001959426 -0.0000947113 0.0008502113 0.0002727936 0.0001295651 0.0007509593 0.0005051271 -0.0004063823 -0.0004038603 0.0000456082 0.0004348659 -0.0494726016 -0.0760826897 -0.0849440839 -0.0198210893 -0.0082138774 -0.0006555314 -0.0362407668 0.0090616295 0.0459580359 0.0119447919 0.0286867957 0.0472967434 0.0649067714 0.0271200668 -0.0034387361 -0.0102648831 -0.0007472364 0.0061055608 0.4421878225 0.2581131607 0.1123800957 0.3686952898 -0.0060039681 -0.2997537164 0.0004981964 -0.0053120167 -0.0033084460 -0.2806878678 -0.1703654436 -0.0985984650 -0.3489664749 -0.0026863134 0.2991424475 0.0115224775 -0.0099538142 -0.0039842428 0.0042651129 0.0050311397 0.0158907949 -0.0053089661 0.0101241571 0.0132840650 -0.0189916004 0.0088336090 -0.0107942709 0.0102024847 -0.0047963494 0.0022853336 -0.1060481451 0.1003177092 0.0459119213 -0.1012224970 0.0374071789 -0.0697293043 -0.0001246785 -0.0008845626 -0.0005484758 0.0245870523 -0.0345432963 -0.0320860394 0.0354219289 -0.0182278155 0.0250946446 0.0019922846 0.0011204963 -0.0016057647 -0.0065842846 -0.0012513141 -0.0031337161 -0.0000482058 0.0002902300 0.0005476544 0.0023503243 -0.0018824413 -0.0021790270 -0.0245545933 0.0239953938 0.0155697366 -0.0186150588 0.0293358209 0.0135539341 0.0000725804 -0.0102172072 -0.0011019228 -0.0025142332 -0.0122995304 0.0003844230 0.0818614008 -0.0314407647 -0.0507009726 0.0426463652 0.0422236355 -0.0207790333 -0.0002831133 -0.0044169405 -0.0006584775 0.0063046487 0.0049115152 -0.0033946333 -0.0342883031 0.0043028726 0.0243731436 0.0165233362 -0.0310213213 -0.0120740736 0.0209274720 0.0289503005 0.0098020045 0.0214720370 0.0260029401 0.0115320520 -0.0018446210 -0.0110849323 -0.0009277420 -0.0031039225 0.0065078175 -0.0023138915 0.0693495330 -0.0186954354 0.0508262668 -0.0235182021 -0.0247262773 -0.0120828299 -0.0075097956 -0.0089557903 -0.0039407029 0.0035604646 -0.0127956891 0.0029814312 -0.0762645156 -0.0029205038 -0.0438119506 -0.0189388342 0.0462673806 -0.0136346623 0.0000836021 -0.0000036534 -0.0001386664 -0.0000848034 0.0002857682 0.0000903742 -0.0005295804 -0.0004968002 -0.0003279887 -0.0005008718 -0.0003665877 -0.0005135679 -0.0000550507 -0.0000923143 -0.0002039214 0.0006801053 0.0011626192 0.0008507332 0.0005033865 0.0001318559 -0.0006195120 0.0007688645 0.0001769501 0.0007443770 0.0036831087 0.0020746954 -0.0001328494 -0.0070944915 0.0011960865 0.0016337568 0.0010555388 -0.0007257125 -0.0005748854 -0.0001664105 -0.0010474368 0.0003533653 -0.0029562611 0.0014431915 -0.0032228540 0.0028754021 0.0013240678 -0.0016391395 -0.0006224512 -0.0000780271 -0.0000584750 0.0003972235 0.0014611041 0.0005994907 -0.0009157511 -0.0004559912 0.0005250864 0.0075957777 0.0006268258 0.0014969775 -0.0089881339 -0.0006448749 0.0075041189 -0.0053319476 0.0064937355 0.0010661939 0.0242667706 -0.1081580311 -0.0794736538 -0.0807341052 0.1366330145 0.0935066803 0.0468898914 0.0648940745 0.0577551288 -0.0778426703 0.0396251950 0.0217224151 -0.0293877491 -0.0338889862 0.0040589118 0.0244976004 0.0119825838 -0.0240038254 0.0808797977 0.0856917351 -0.0106896046 -0.0064240684 -0.0273610952 -0.0306488176 -0.0319591893 -0.0067143180 0.0481363789 -0.0255112795 -0.0262434506 0.0050408051 -0.0092545607 0.0321785427 0.0567100379 0.0124691550 0.0046863791 -0.0085719430 0.0413115224 -0.0570694190 -0.1651159264 -0.1071058764 -0.2127988481 -0.1045165510 -0.0024933498 -0.0292584237 -0.0308837285 0.0146856472 0.0044726913 0.0005868239 -0.0183857709 0.0311665105 0.0554465804 -0.0139833046 -0.0004417868 0.0137749389 0.0180292505 0.0123253315 0.0002384647 -0.0011773466 0.0044121649 0.0239760501 -0.0175385758 -0.0216615164 -0.0359405886 0.0023437016 0.0045619565 0.0113837831 0.0040340994 0.0008708781 -0.0074307978 0.0819227199 0.0160646523 -0.1640258830 0.0203749898 0.0163486616 0.0218097199 -0.0555330680 -0.0000069560 0.1505282838 -0.0156336907 -0.0198676840 -0.0436800659 -0.0618851476 -0.0394532898 0.0151418840 -0.0156373152 -0.0165197708 0.0039509948 0.0460960075 0.0281409596 -0.0510329843 0.0029439030 -0.0029928151 -0.0039304925 0.0061859955 -0.0026010350 -0.0174674704 0.0105195117 0.0091807887 0.0027301573 0.0021718913 0.0058718649 0.0027756533 -0.0113170904 -0.0022704707 -0.0048041975 0.0030521351 0.0026359966 -0.0036667790 0.1083734382 0.0169122764 0.0584162451 -0.0011821381 0.0034279654 0.0061719473 -0.0153814853 -0.0043788789 0.0049771324 0.0086951580 0.0007085596 -0.0048565597 0.0081353117 -0.0207065285 0.0139624720 -0.0080511914 0.0012114113 0.0258618001 -0.0080086847 -0.0146246393 0.0297236945 -0.2908603000 -0.1869576933 -0.3118025545 -0.4292763832 -0.1931781302 -0.0314756301 -0.3702228461 0.1528801888 -0.2833139368 0.0233295922 0.0040031188 -0.0269359683 0.0140167233 -0.0213890140 -0.0287813772 0.0107749234 -0.0290862567 -0.0131006638 -0.0210509825 -0.0066532238 -0.0003432839 -0.0199556536 -0.0108249728 0.0109425781 0.0080246731 0.0011267819 -0.0065661309 -0.0042916385 -0.0049322333 -0.0056989411 -0.0004547738 -0.0007002439 0.0003691862 -0.0027595074 0.0010509411 0.0035494932 0.0009521023 0.0019184993 0.0031954774 0.0037700870 0.0014429397 -0.0004253693 -0.0004781170 -0.0001297797 0.0000106140 0.0294448519 0.0214819454 0.0059408276 0.0274857227 -0.0047743540 -0.0184973653 -0.0019035249 -0.0007548552 0.0002690716 -0.0191934267 -0.0121684272 -0.0066478706 -0.0184062756 -0.0022202989 0.0173975562 0.0030541082 -0.0033714697 -0.0002926358 0.0004573367 0.0000731555 0.0022150655 -0.0025901246 0.0047330828 0.0052266552 -0.0023980461 0.0017113855 -0.0004734199 -0.0006245007 -0.0004871931 -0.0016726565 -0.0167458652 0.0257736839 0.0064687142 -0.0282447307 0.0154845806 -0.0284049324 0.0051403421 -0.0041627869 -0.0016226430 0.0098380988 -0.0106031334 -0.0060224852 0.0259701835 -0.0108980199 0.0212375271 0.0006179549 0.0000525392 -0.0019970885 0.0007201920 0.0004142097 0.0011901657 -0.0016571519 0.0001196732 -0.0035180895 -0.0015946838 0.0026452425 0.0041321528 -0.0023792163 0.0018961682 0.0013856369 0.0014589594 0.0005664288 -0.0006363834 -0.0004877672 0.0000255899 0.0003562821 -0.0002678521 -0.0013294136 0.0000475818 0.0085027382 -0.0022202766 -0.0055759583 0.0058670154 0.0065415238 -0.0031434976 0.0012263258 -0.0007651363 -0.0008078795 -0.0003927484 -0.0005234342 0.0002128253 -0.0098963504 0.0017933031 0.0058991915 -0.0020441623 0.0054482629 0.0015984726 0.0014262101 -0.0006763767 0.0008228805 -0.0002696423 -0.0002661794 -0.0002987726 -0.0005772276 0.0002563415 -0.0002422613 0.0001553847 0.0002773496 0.0000630077 -0.0043585826 0.0005926246 -0.0039219938 -0.0001428343 -0.0002698417 -0.0001797139 -0.0002189539 0.0003547347 -0.0000286443 0.0001917818 0.0001821773 0.0001090551 0.0031988020 0.0000328865 0.0011339354 0.0003853423 0.0001048515 -0.0001011128 -0.0027544241 -0.0001382425 0.0038912777 0.0029744008 -0.0074400462 0.0013861851 0.0200311965 0.0125123067 0.0053301863 0.0141459667 0.0138751895 0.0098812068 -0.0033937261 0.0005023759 0.0068864091 -0.0065032381 -0.0244375863 -0.0164211809 0.0100819660 -0.0028342059 -0.0003201274 -0.0067530416 0.0073930934 -0.0118993013 -0.0006046904 -0.0004175746 0.0000659402 -0.0030287940 0.0008504695 0.0013324879 0.0004319492 0.0001658422 -0.0001595637 0.0014491653 0.0000101965 -0.0007091552 0.0007617279 -0.0009714810 0.0005221423 -0.0006672528 -0.0007112039 0.0003140970 -0.0006903890 -0.0004995081 -0.0002412718 -0.0006119926 -0.0002362383 -0.0003929186 -0.0004879018 0.0007789789 -0.0002554650 0.0022199115 -0.0005891735 0.0014716239 0.0017754151 -0.0001221629 -0.0015424901 0.0008124806 -0.0014278657 -0.0001094022 -0.0067403869 0.0214383351 0.0156505814 0.0172087738 -0.0282903335 -0.0197887380 -0.0063324880 -0.0090007298 -0.0032994406 -0.1512799244 0.0024735435 0.0040180352 -0.0767924994 -0.0832759290 0.0091405110 0.0111891708 -0.0110949176 -0.0352664984 0.0716356584 0.0308770028 -0.0410960046 -0.0003750301 0.0059251646 0.0083220836 -0.0154735911 0.0006508065 0.0268576528 -0.0312331201 -0.0191242946 0.0214933235 0.0671741485 0.0902913604 0.0081618051 0.0006212157 -0.0076532763 -0.0002266793 0.0208812173 -0.0265227798 -0.0785735393 -0.0899130544 -0.1468564646 -0.0523139745 -0.1302962265 -0.0076280693 0.0293052265 0.1036074627 0.0634010367 0.0531437026 0.4896359943 -0.3209718190 -0.3598436018 -0.0774437742 -0.0685756750 -0.0474862340 0.0031396839 0.0021629596 0.0002518846 0.0153608779 0.0101858403 -0.0037046903 -0.0017196560 -0.0083430218 -0.0301862842 0.0422659102 0.0227388575 -0.0288954847 0.0106748517 0.0175795526 0.0426907452 0.0880191994 0.0113170902 -0.1516755878 0.1831047418 0.1920944790 0.3036533132 -0.0802316546 0.0116388702 0.2733020233 -0.0874188322 -0.0900855701 -0.1314258910 -0.1259338292 -0.0806996718 0.0257666589 -0.0517598123 -0.0583898074 -0.0002811510 0.0516268178 0.0074566450 -0.0352023727 0.0000093878 -0.0001147162 0.0005752812 -0.0166576668 -0.0051275421 0.0299948509 0.0009639022 -0.0086297781 -0.0092489116 -0.0031400689 -0.0059643617 -0.0031008118 0.0027142021 0.0031881726 0.0014907841 -0.0007526443 -0.0019354596 0.0014625771 -0.0164044545 -0.0048128156 -0.0089944864 0.0002421030 -0.0016924899 -0.0019113233 0.0160082312 0.0040447466 -0.0059263775 -0.0095119859 -0.0034513779 0.0038324826 -0.0034544364 0.0071759879 -0.0060600588 0.0021730487 -0.0015624645 -0.0041530459 0.0028972220 0.0064407048 -0.0107143240 0.0456081024 0.0365582749 0.0405820533 0.0568864503 0.0393647224 0.0080896777 0.0581561716 -0.0258139596 0.0430713355 -0.0035753439 -0.0018970701 0.0048929149 -0.0038067393 0.0064711927 0.0077474705 -0.0024533076 0.0083437009 0.0039800980 0.0208448767 0.0072079342 0.0154124956 0.0059235648 0.0250170886 -0.0016832113 -0.0206599992 0.0106764774 0.0287214243 0.0002112188 0.0002096310 0.0002924947 0.0010038358 0.0001120815 -0.0002083483 -0.0003294714 -0.0004255884 0.0000023162 -0.0003949051 -0.0001907676 0.0002505538 0.0003426245 0.0001437703 -0.0000024929 -0.0001423569 0.0000092753 -0.0000607725 -0.0013810209 0.0003049037 -0.0013188192 -0.0021320043 -0.0008565458 0.0019357955 -0.0006394655 -0.0001873858 -0.0001700258 -0.0002459192 -0.0002768594 -0.0002500818 -0.0001442976 -0.0000360653 -0.0000737295 0.0000995062 0.0001027339 0.0000451874 -0.0003391391 0.0002534334 -0.0001051052 0.0004617074 -0.0004831586 -0.0002046605 0.0005327413 -0.0005360788 -0.0002034529 -0.0001461608 0.0002449595 -0.0001210047 -0.0008853467 -0.0007680117 0.0007582861 0.0039548626 -0.0016469547 0.0042066241 -0.0019273268 0.0014420980 0.0002052691 0.0009044946 -0.0008667365 -0.0003669263 -0.0048687898 0.0006932325 -0.0028939083 0.0002127265 -0.0000986515 -0.0004752647 0.0004166185 0.0003654779 0.0006070080 0.0005709176 -0.0000470861 0.0015394118 0.0008086829 -0.0011071567 -0.0016221626 0.0001469394 -0.0001924766 -0.0000737452 -0.0013038541 0.0005306825 0.0007213463 0.0005010061 -0.0001329610 -0.0002769498 -0.0001218200 0.0001229956 0.0000873337 -0.0025495240 0.0006251858 0.0013078201 -0.0011830973 -0.0011613227 0.0005230553 -0.0002883970 -0.0000315036 0.0002205105 0.0001713947 0.0005787701 -0.0000501101 0.0025874853 -0.0007060180 -0.0020390336 0.0012153952 -0.0035478037 -0.0010949918 0.0001709508 0.0005469817 0.0000510340 0.0006905785 0.0003419247 0.0003917806 -0.0001289192 -0.0001905965 -0.0000821788 0.0000138487 0.0000991508 0.0000049110 0.0023136572 -0.0004456697 0.0018350503 -0.0002005010 -0.0002154786 -0.0001009943 -0.0000597984 -0.0001169871 -0.0000452843 0.0000268127 -0.0004190360 0.0000460967 -0.0021240281 0.0000662073 -0.0011311944 -0.0007455557 0.0015350366 -0.0004635030 0.0017176564 0.0042667062 -0.0103440893 0.0143896988 -0.0021984387 0.0128860393 -0.0187930785 -0.0072357592 -0.0116940579 -0.0178529004 -0.0248838585 -0.0030888997 0.0013368902 -0.0018967738 -0.0084155781 0.0239714374 0.0229339631 0.0104087931 0.0142383831 -0.0045388131 -0.0118292223 0.0486154791 0.0316350259 0.0173082302 0.0958306727 0.0756313721 -0.0254347540 -0.2322297430 0.0235951741 0.1126195700 0.0499289703 -0.0383849560 -0.0315164929 -0.0000387279 -0.0722685274 -0.0072333210 -0.0711046690 -0.0031584227 0.0306750252 -0.0662988741 0.0233756539 -0.0299476449 0.0242471265 0.0702813254 0.0086799873 0.0570814694 0.0242109594 0.0301460774 0.0626555949 -0.0999727109 0.0169268174 -0.2128664598 0.0560844323 -0.0989958985 0.0261546265 0.0110181240 0.0097263681 0.0210031223 -0.0180624972 -0.0088527981 0.0038131765 -0.0004770625 0.0000799986 -0.0052446611 0.0060828887 0.0034819119 -0.0057205429 -0.0054473272 -0.0041757012 -0.0122018063 0.0099404391 0.0058782694 -0.0096266492 -0.0084403597 0.0042624399 0.0015884393 0.0005883779 -0.0018808951 0.0008499083 -0.0013094623 -0.0033489130 0.0001495244 0.0007623146 0.0008759314 0.0002587666 0.0006303855 0.0002604614 -0.0013314918 -0.0025109850 -0.0010391688 0.0007439287 0.0022906957 0.0024980389 -0.0037937131 -0.0077229480 -0.0050024520 -0.0019867515 0.0020714998 0.0071527888 0.0018090090 0.0117935207 0.0052682534 -0.0041014302 0.0015775056 0.0032089875 0.0036142024 0.0002051414 -0.0005246612 0.0180334675 -0.0108218958 -0.0216462266 0.0041612187 0.0024021524 -0.0008585635 -0.0016399462 -0.0011675877 0.0001999363 -0.0001342848 -0.0005395177 -0.0017482762 0.0009233139 0.0015974817 0.0025367656 -0.0011743899 -0.0006491233 0.0006521536 -0.0010971350 -0.0009066028 -0.0005104802 -0.0108259318 -0.0016505096 0.0222072501 -0.0065672435 -0.0108965039 -0.0128794456 0.0065646187 -0.0000990034 -0.0178184580 0.0046006244 0.0056509000 0.0099614827 0.0078733345 0.0054636185 -0.0017374580 -0.0004880207 -0.0007142825 -0.0000880306 -0.0065652478 -0.0069844005 0.0011875577 -0.0692980796 0.0539091531 -0.0179602589 0.0004721451 -0.0004568790 0.0004521044 -0.0000510628 -0.0006752830 -0.0008598691 0.0000430274 0.0004138317 0.0003750226 0.0004516200 -0.0000976556 0.0002250218 -0.0004508136 0.0002235988 -0.0004804073 -0.0031843378 -0.0008366528 -0.0018773910 -0.0002759343 0.0000562767 -0.0000875443 -0.0000792257 0.0000845290 0.0001877644 -0.0000125760 -0.0001395091 -0.0000733120 0.0015386434 0.0006664764 0.0015659447 0.0030722326 -0.0000638422 0.0007712566 -0.0005464131 -0.0022029758 0.0013477724 0.0091579950 0.0070816410 0.0086330915 0.0112845951 0.0076192456 0.0014922631 0.0118084017 -0.0049565712 0.0094709364 0.0005582568 -0.0002476569 0.0003596582 -0.0003859481 -0.0000312209 0.0002729434 0.0005586307 0.0001691433 0.0000275864 0.0003833293 -0.0000185744 0.0000886901 0.0002674147 0.0004036480 -0.0002012327 -0.0001930357 0.0001075518 0.0000232696 -0.0870461644 -0.0342549869 0.0219882958 -0.0272555844 -0.0127586352 -0.0003833432 0.0169579042 0.0191545096 0.0209498755 0.0147470014 0.0035716901 -0.0048280185 0.0208312636 -0.0061675828 -0.0285461807 -0.0306456858 -0.0007619750 0.0198931183 0.1090463951 0.0693278869 0.0348372308 0.1044212306 0.0160848293 -0.0471503400 0.0000656346 0.0000341635 0.0002667300 0.0811836851 0.0263988952 -0.0175282687 0.0939809000 -0.0066685181 -0.0871913310 -0.0220632044 0.0183269733 0.0037285647 0.0096152392 -0.0188025417 -0.0223645456 0.0145489975 -0.0085045162 0.0034589346 0.0210585235 -0.0015408465 0.0280424731 -0.0298222595 0.0104379959 -0.0174094346 0.0809374593 -0.0826656847 -0.0415851494 0.0868332076 -0.0430531839 0.0362802498 -0.0000251913 -0.0000381492 -0.0000830577 0.0725374738 -0.0464106309 0.0108641622 0.0936972504 -0.0228606818 0.0821459177 -0.0018576145 -0.0000707631 0.0041236258 -0.0035071473 -0.0013109685 -0.0030682133 -0.0022381198 0.0004269817 -0.0039811559 -0.0026885449 0.0024930821 0.0032855488 -0.0528594931 0.0569632683 0.0359543361 0.0320422858 0.0239664996 -0.0139757431 -0.0112735405 0.0059961186 0.0066348822 -0.0219562023 -0.0483030164 0.0082666057 0.2431535265 -0.0561756324 -0.1453004472 0.1762181583 0.1978044339 -0.0821012553 0.0381954432 -0.0242717090 -0.0273337921 -0.0111091530 -0.0056377049 0.0063780574 -0.3120453351 0.0600151271 0.2217300835 -0.0489987690 0.1398149108 0.0415606036 0.0230069497 -0.0360100854 0.0130235216 -0.0639823888 -0.0405422035 -0.0342837123 0.0382278657 0.0121796405 0.0245232026 -0.0070514355 0.0075579224 -0.0051336718 -0.3106481650 0.0487893649 -0.2195493502 -0.0794983456 -0.1015657920 -0.0372128421 -0.0110810474 0.0001417939 -0.0057633794 -0.0054261311 0.0504695953 -0.0067245165 0.2432665687 -0.0242715642 0.1393857582 0.0982150370 -0.2288238517 0.0702422117 -0.0001666904 0.0002622955 0.0001861236 0.0002822874 -0.0010620905 -0.0010874034 0.0003180104 -0.0013581684 -0.0016780178 -0.0007285073 0.0001107059 -0.0006296954 0.0001106518 -0.0001843818 0.0003044834 0.0033406403 0.0003512787 0.0000831187 -0.0027064011 0.0034956272 -0.0001988023 -0.0029222298 -0.0008579962 -0.0039142343 0.0038110966 0.0025868462 -0.0010921349 -0.0019739138 -0.0003854131 0.0020338817 0.0010593389 -0.0011535936 -0.0009379648 -0.0015585060 -0.0024213174 0.0006231839 -0.0015359638 0.0012176214 0.0019540784 -0.0030225398 0.0000756060 -0.0005379170 -0.0010162136 0.0022381541 -0.0008501148 0.0013048711 0.0002811259 0.0005645593 0.0023300639 -0.0033835569 0.0006178417 -0.0040788979 0.0008274669 -0.0012675875 0.0039587100 0.0004701953 -0.0017043096 0.0028378714 -0.0033293177 -0.0008161221 -0.0055633213 0.0295248082 0.0217187750 0.0210071105 -0.0345349054 -0.0239348279 -0.0160666618 -0.0203785295 -0.0178018151 0.1181511792 -0.0767782203 -0.0568681594 0.1006331122 0.0893517898 -0.0385909633 -0.0011727847 0.0089576699 0.0154631465 0.0116390347 0.0379418172 0.0292095719 -0.0093091344 -0.0318319232 -0.0314214019 -0.0140415133 -0.0031844672 0.0221728492 0.0108386187 0.0095517752 -0.0046243651 -0.0415226410 -0.0373299991 0.0125835328 0.0433695519 0.0833447069 0.0479608107 0.0380694262 -0.0359512493 -0.1237285251 -0.0346877746 -0.1185299187 -0.0767146818 0.0743901213 -0.0240492452 -0.0528431938 -0.0441620415 -0.0022749225 0.0127844337 -0.2988752415 0.2071350570 0.3719330699 -0.0880986369 -0.0529040967 0.0080883046 0.0198158868 0.0139091492 0.0005766162 0.0003094072 0.0034523197 0.0195519226 -0.0053473696 -0.0096665417 -0.0254623661 0.0324183581 0.0114889177 -0.0462413340 0.0251706103 0.0249415453 0.0300232822 0.1667660921 0.0278884097 -0.3681829221 0.1821997943 0.2088183999 0.3272851830 -0.1030477627 -0.0020251941 0.2828831154 -0.1176489822 -0.1340156366 -0.2279466671 -0.1789192336 -0.1136662387 0.0371713811 0.0197036752 0.0235616398 0.0081365844 0.0487021251 0.0773569904 -0.0214583329 -0.0028836002 0.0016400718 -0.0009853620 0.0027001878 0.0028963896 -0.0226194318 -0.0084784508 0.0022546097 0.0103145904 0.0019060956 0.0034769828 0.0010085039 0.0000213109 -0.0016629055 0.0002058275 0.0004072617 0.0006672459 -0.0002477520 -0.0046564414 -0.0015900443 -0.0019748425 -0.0007126606 0.0008556444 0.0004791148 -0.0033503597 -0.0010417810 0.0003757696 0.0023672302 0.0029960390 0.0002769644 -0.0003763399 -0.0031410700 0.0005497389 -0.0048321200 0.0009996344 -0.0013083807 -0.0003576599 0.0016830006 0.0002553626 0.0170325781 0.0211398392 0.0086613758 0.0072666273 0.0119077952 0.0027200443 0.0281634951 -0.0110566204 0.0070948335 0.0012723783 0.0005486712 -0.0010576475 0.0002453212 -0.0014589131 -0.0016571111 0.0024929389 -0.0033885492 -0.0018946927 -0.0028035966 -0.0011291901 -0.0135759758 0.0073185713 -0.0152985293 -0.0049608221 0.0143101655 -0.0116750705 -0.0204667064 -0.0030762579 -0.0017759082 0.0003013065 -0.0007355526 0.0001021437 -0.0000180268 0.0002626825 0.0010618809 0.0009901201 0.0000425145 -0.0004156633 -0.0008729521 0.0011453361 -0.0000062169 -0.0007279769 -0.0013790153 0.0001326413 0.0012579543 0.0045278286 0.0006589072 0.0023402309 0.0044692233 -0.0032093397 0.0011255253 0.0006589105 0.0001974427 -0.0013416941 0.0038327029 0.0020992480 -0.0004519024 0.0036133277 0.0005467026 -0.0035243945 -0.0013113768 0.0013522262 0.0002336927 0.0007027893 -0.0009209562 -0.0009364378 0.0009855909 -0.0010291951 -0.0006005141 0.0005060235 0.0003424167 0.0015256814 -0.0008978780 0.0004882281 -0.0002075788 0.0034759708 -0.0057601791 -0.0015326644 0.0044046647 -0.0031132671 0.0029153821 -0.0002750998 0.0000230489 -0.0002787519 0.0022360770 -0.0008854380 0.0010127140 0.0035866955 -0.0001908553 0.0030415909 -0.0003938264 -0.0001845839 0.0014010332 -0.0001571920 0.0000041104 -0.0003201354 0.0000993573 0.0000181580 0.0001540427 -0.0001323444 0.0001770994 0.0000944703 -0.0018548398 0.0014854260 0.0012017997 0.0015932446 0.0001688886 -0.0008893319 -0.0012077916 0.0002881181 0.0006631417 -0.0003807945 -0.0015914252 0.0000664394 0.0104044896 -0.0025949885 -0.0058732624 0.0066483441 0.0069764323 -0.0030081086 0.0011893178 -0.0002534442 -0.0008043617 -0.0002085744 -0.0007763961 0.0000578689 -0.0095976376 0.0024353767 0.0070868260 -0.0021741158 0.0071915219 0.0019829996 0.0017716746 -0.0001878364 0.0009688834 -0.0017052058 -0.0006463797 -0.0008472170 0.0018687745 -0.0001360326 0.0011409770 -0.0002553829 0.0009597628 -0.0002440347 -0.0101853669 0.0011311621 -0.0065791345 -0.0055239857 -0.0069787905 -0.0025657201 -0.0010143411 -0.0003908805 -0.0005680601 -0.0001254335 0.0014994547 -0.0001812419 0.0076712743 -0.0012375027 0.0045941027 0.0036168707 -0.0088149808 0.0027288138 -0.0017771219 -0.0025317571 0.0025688832 0.0002811910 0.0015767806 0.0118787826 0.0162964988 0.0242200859 0.0205889458 0.0189700759 0.0110327683 0.0171883258 0.0069116546 0.0063430469 0.0031596173 -0.0562172579 -0.0332312722 -0.0207149163 -0.0090108719 -0.0229702870 0.0266870009 -0.0279671227 -0.0280783333 0.0029121391 0.0768915351 -0.0508113959 -0.0323851023 -0.1097629111 0.0999334031 0.0847018769 0.0397630332 0.0566477351 -0.0164804659 -0.0318269545 0.0567000617 0.0198155443 -0.0383849203 0.0124253930 0.0197039301 0.0434987319 -0.0142116040 0.0216966379 0.0353191543 0.0292282380 0.0146069787 -0.0285747704 0.0533636530 -0.0169559018 -0.0791064497 -0.0055031866 -0.0281791324 0.1527885330 0.0397454501 0.0882845570 -0.0175365284 -0.0004863340 -0.0090683364 0.0173249996 -0.0062334607 -0.0089268549 -0.0000185700 -0.0010975134 0.0019724756 -0.0004160244 0.0008827487 -0.0010822853 0.0007412803 0.0006635661 -0.0008843475 0.0044914016 -0.0059902048 -0.0016583482 -0.0114915803 -0.0107095449 0.0024001978 -0.0042690557 -0.0054091151 -0.0006067392 -0.0054980221 -0.0010802091 0.0053326454 0.0050356470 0.0101194123 0.0066596758 0.0022497210 -0.0033774475 -0.0087237688 0.0005238812 0.0054624590 0.0058545071 0.0088632498 0.0058820498 -0.0065749510 -0.0078014631 -0.0167251558 -0.0126398884 -0.0068122336 0.0017451016 0.0145370869 -0.0021669020 -0.0073170608 0.0010658109 0.0014839379 -0.0011388852 -0.0019114082 -0.0016538950 -0.0009842721 -0.0004123512 -0.0033174071 0.0012886463 -0.0003251881 0.0031549628 0.0027156252 -0.0000387439 0.0056489616 0.0035373931 -0.0007655484 -0.0025654455 -0.0003243836 0.0063747599 -0.0022364541 -0.0027803883 -0.0048682919 -0.0017997553 -0.0004656253 0.0041340124 -0.0017125001 -0.0021252472 -0.0036727682 0.0072988511 0.0009471842 -0.0163520351 0.0043929381 0.0054346028 0.0082074498 -0.0012391496 0.0007384723 0.0004241116 -0.0013154441 -0.0008138067 -0.0025375467 -0.0109645913 -0.0068315900 0.0021204119 -0.0040330569 -0.0051243794 -0.0005030304 -0.0018725353 -0.0015419747 -0.0018084345 0.0357946491 -0.0581301024 -0.0671991947 0.0005743803 -0.0001874930 -0.0018224434 -0.0003467692 0.0002881264 0.0005670684 0.0001881608 0.0004088494 0.0002889046 -0.0002909870 -0.0000915040 -0.0001765207 0.0004052061 -0.0000211153 0.0007023855 0.0013233488 -0.0000600353 0.0014348864 0.0001478608 0.0000285562 0.0000318893 -0.0005292413 -0.0000998343 0.0001951222 0.0002541273 0.0002036660 0.0000527397 -0.0030645102 -0.0013814634 -0.0026892085 -0.0026104014 0.0002055302 -0.0005357686 0.0017399682 0.0006651830 -0.0028569679 -0.0009384410 0.0041180097 -0.0062464336 -0.0096073072 -0.0041848102 -0.0003851694 -0.0006192722 0.0004710992 -0.0092523337 -0.0000131520 0.0000383870 0.0000561164 -0.0000129776 -0.0005682201 0.0003316537 -0.0010003374 0.0000395904 0.0000099746 -0.0004084544 -0.0003755806 -0.0024083562 0.0005128441 -0.0019676550 -0.0003604109 0.0009327727 -0.0006546107 -0.0013450426 -0.0553064631 -0.0744078352 -0.0982250272 0.0558664121 0.0542955113 0.0519328716 -0.0166522192 0.0218547170 0.0516478663 -0.0030001109 -0.0712272007 -0.1325620680 0.0395812581 0.0231732779 0.0103992335 -0.0725313361 0.0182959270 0.0985601148 -0.0917616652 -0.0275332670 0.0238213458 -0.0741413180 0.0231670396 0.1113819606 -0.0044533460 0.0071788019 -0.0014305339 0.1767673197 0.1072869813 0.0449185846 0.1917532244 0.0320488442 -0.1367133510 -0.0173818540 0.0327634340 0.0365022789 0.0106251081 0.0118682025 0.0376745726 -0.0140869412 -0.0331590708 -0.0870925933 -0.0231669196 0.0182652922 0.0032254397 0.0523402083 -0.0080527660 0.0663642207 0.0236199658 -0.0064570484 0.0256664489 0.0265784048 0.0077153021 0.0570421897 0.0018244208 0.0017213705 -0.0013609709 -0.1049565294 0.0995041417 0.0371089250 -0.1174254822 0.0617987134 -0.0832932815 -0.0096183663 -0.0027476258 0.0129609734 0.0125288810 0.0024347536 0.0051601267 0.0074179263 -0.0028031648 0.0095013909 -0.0058872609 0.0037878565 0.0029672049 -0.0787867499 -0.0257986259 0.0363987526 0.0380108977 -0.0551954450 -0.0269149256 -0.0540704306 0.0342208378 0.0343360021 0.0079095216 -0.0423961398 -0.0085017503 0.2540298148 -0.0418156556 -0.1453609751 0.2074015899 0.2034103285 -0.1002455096 0.0451113489 0.0228695598 -0.0264164817 -0.0080812145 -0.0336607119 0.0023905365 -0.1519627396 0.0742485997 0.1102716871 -0.0785414799 0.2491503860 0.0680860075 -0.0492618941 -0.0287741738 -0.0259420748 0.0630591885 -0.0387224326 0.0325800626 -0.0360669908 0.0284627726 -0.0255503283 -0.0002857983 -0.0288418246 0.0027827604 0.1923896362 0.0077571924 0.1319982620 0.1388422534 0.1862898630 0.0647711418 0.0529461108 0.0147459172 0.0288931963 -0.0157014957 -0.0400067736 -0.0060755562 -0.2358801835 0.0423063728 -0.1320884630 -0.1241591024 0.2504343596 -0.0871099373 0.0000445880 0.0001434757 0.0010390025 -0.0002914847 -0.0009549933 -0.0021445132 0.0015553891 -0.0009296840 -0.0009580486 -0.0007555938 0.0010358729 -0.0011714881 0.0005696094 0.0005406518 0.0002756726 -0.0043468057 -0.0028723636 -0.0019847885 -0.0009703253 -0.0021363131 0.0025217793 -0.0026515511 -0.0021377669 -0.0002872445 0.0202507120 -0.0711945409 -0.0089396056 0.0769858468 0.0413431246 -0.0067384340 -0.0177189040 0.0544614453 0.0111713912 -0.0289696021 0.0501218008 0.0237954670 0.0487066321 0.0393532087 -0.0191815184 0.0114449241 -0.0337459748 0.0060852448 -0.0750561667 -0.0668061608 -0.0369825641 -0.0121140966 -0.0886129249 -0.0004603828 0.0960382816 0.0660240549 0.0323619123 -0.0474711337 -0.0964329559 -0.0576852539 0.0034892737 -0.0064494980 0.0010993878 -0.0034640060 0.0056843367 0.0028090953 0.0001059190 -0.0008691058 -0.0006714206 0.0006374147 0.0002261283 0.0002791050 0.0015286321 0.0017439302 0.0022851767 0.0058227383 -0.0012225550 0.0045704239 -0.0796758193 -0.0737182198 0.0218246848 -0.0182496779 -0.0258226591 -0.0071338534 -0.0229161247 -0.0005858401 0.0266059485 0.0277233940 0.0553253404 0.0357235772 0.0094121294 -0.0195039173 -0.0446685266 0.0005320269 0.0236069923 0.0317802496 0.0446685054 0.0320676525 -0.0269975355 -0.0477120501 -0.1067081851 -0.0788981549 -0.0385941667 0.0065624216 0.0819385975 -0.0243899580 -0.0407008571 -0.0008978770 0.0117450720 -0.0065555296 -0.0103530021 -0.0063341895 -0.0086912504 -0.0119739408 -0.0453961246 0.0275861650 0.0350677220 0.0244089468 0.0202541596 0.0060420144 0.0393650174 0.0254114352 -0.0068803743 -0.0195106042 -0.0022562755 0.0465106314 -0.0176449314 -0.0207113196 -0.0325484688 -0.0139662652 -0.0038252814 0.0262477714 -0.0105160893 -0.0137099631 -0.0260354585 0.0498656724 0.0070406429 -0.1130789171 0.0275873302 0.0342877437 0.0549688537 -0.0102897138 0.0008390428 0.0072976035 -0.0110553459 -0.0125189962 -0.0265223029 -0.0790462695 -0.0519162483 0.0143200243 -0.0208509738 -0.0259627524 -0.0053549194 -0.0291715227 -0.0476419600 0.0057881927 -0.0167797780 0.1016045134 0.1801163129 0.0020339300 0.0019756771 -0.0040677498 -0.0037091827 -0.0004491927 0.0018379530 0.0003425335 0.0003242900 0.0003312667 0.0005998094 -0.0002284655 0.0002164931 -0.0006399455 0.0002253465 -0.0015436737 -0.0025128276 -0.0004410415 -0.0027663539 -0.0004300312 0.0000761905 0.0001987906 0.0004628207 0.0005076382 -0.0000311478 -0.0003925869 0.0007940297 0.0012722462 0.0066827913 0.0008544588 0.0066550282 0.0028623576 -0.0001629498 0.0013657940 -0.0040425316 -0.0000601879 0.0064726110 0.0017893145 -0.0028963091 0.0061215965 0.0146843568 0.0154163243 0.0033041370 0.0057286894 -0.0028243061 0.0205721908 0.0002092800 0.0002783528 -0.0012882929 0.0001331291 0.0012264615 -0.0010259744 0.0020763489 -0.0011947777 -0.0005127324 0.0025124631 -0.0005368693 -0.0117237161 0.0058678469 -0.0068794197 -0.0033578731 0.0032594985 -0.0037481573 -0.0055376435 -0.0163434207 -0.0952713031 -0.1580128417 0.1047547390 0.0871027529 0.0670191845 -0.0540686373 0.0151464900 0.0681035462 -0.0146229367 -0.0979500139 -0.1731124505 0.0638524752 0.0473715809 0.0340302288 -0.0876413032 0.0222999286 0.1199295972 -0.1633344652 -0.0750940144 0.0132055595 -0.1069072372 0.0140369978 0.1231924207 -0.0066528812 0.0084550987 -0.0025609781 0.1167218995 0.0850341057 0.0485406162 0.1587834841 0.0376604522 -0.0975790574 0.0676931361 -0.0993769274 -0.0855037244 -0.0492905544 -0.0042095621 -0.0769931198 0.0191125622 0.0842635105 0.1970222054 0.0525395628 -0.0558462894 -0.0349063384 -0.1021460574 0.0138278300 -0.1366630972 -0.1018248608 0.0776624355 -0.0277810010 -0.0904074055 0.0084729481 -0.1201628671 -0.0050438077 -0.0027179954 0.0039776446 0.1340030955 -0.1441462379 -0.0707202398 0.1614496996 -0.1040273651 0.0994653757 -0.0113736946 -0.0034784941 0.0136134763 0.0191518443 0.0041895802 0.0090295696 -0.0146845634 0.0060147878 -0.0174583153 0.0161914694 -0.0112233445 -0.0101646013 -0.0255221241 -0.0259229989 0.0075588863 -0.0007617524 -0.0331607153 -0.0039027413 -0.0365933029 0.0035142022 0.0214020989 0.0259622727 0.0023394677 -0.0146153767 0.0881626194 -0.0298440184 -0.0499961519 0.0359727272 0.0110910262 -0.0205578983 -0.0069302117 0.0316555816 0.0091890842 0.0104177925 -0.0203169892 -0.0079459358 0.1095133730 0.0061159980 -0.0776987080 -0.0061250383 0.0550775356 0.0078935355 0.0447985495 0.0556682107 0.0225645695 -0.0565019062 0.0685995306 -0.0269988094 0.0105930918 -0.0505840599 0.0095921600 0.0174124877 0.0388233116 0.0065257738 -0.0289037685 -0.0516123731 -0.0125209199 -0.1296116362 -0.1929979463 -0.0587702288 -0.0763089100 -0.0050907063 -0.0428576851 0.0345198099 0.0169299581 0.0182479917 0.2483463719 -0.0337988981 0.1357260474 0.1188155280 -0.2033809821 0.0820781646 0.0006240887 0.0005075868 0.0034426759 -0.0005162217 -0.0055288565 -0.0112580169 0.0029995265 -0.0045186094 -0.0032527682 -0.0077518124 -0.0013137991 -0.0054903382 0.0001238401 -0.0004495322 0.0006262692 -0.0089913120 -0.0050051355 -0.0014299120 0.0003079974 -0.0026558455 0.0013293916 0.0003322972 0.0009262493 0.0005385984 -0.0124672157 0.0253729994 0.0064522748 0.0021831075 -0.0249929478 -0.0111346724 -0.0018713878 -0.0210810931 -0.0005461927 0.0085290189 -0.0209470555 -0.0070298194 -0.0080667064 -0.0074035569 0.0030359744 -0.0083150048 0.0112870468 -0.0041667711 0.0123466166 0.0136495568 0.0061337226 0.0070600779 0.0161176680 0.0022238650 -0.0146301970 -0.0184062478 -0.0043294449 -0.0028399721 0.0192999927 0.0065903182 0.0034247716 0.0022113046 -0.0000673930 0.0014598055 -0.0031886607 0.0000430744 -0.0042371751 0.0042483084 0.0031836182 0.0050753318 -0.0063541128 -0.0050739294 0.0015997508 0.0016442682 0.0022729724 -0.0074741133 0.0280062704 0.0310254994 -0.2227952812 -0.2050665580 0.0631019498 -0.0458500557 -0.0666923571 -0.0211623559 -0.0562670823 0.0007311366 0.0681434263 0.0741687124 0.1480078557 0.0957687006 0.0234167580 -0.0531702121 -0.1181976215 0.0002851260 0.0593792676 0.0857913553 0.1167144638 0.0844175266 -0.0680504528 -0.1310838803 -0.2918676503 -0.2156028956 -0.1041605247 0.0154740730 0.2196508814 -0.0780077155 -0.1071212228 -0.0094238668 0.0284677400 -0.0156312391 -0.0236785601 -0.0108633753 -0.0266768735 -0.0439486051 -0.1270544348 0.0789387810 0.1024201115 0.0882039159 0.0694844418 0.0203144430 0.1327316346 0.0862359645 -0.0243375258 -0.0671440021 -0.0077995849 0.1578099481 -0.0613183196 -0.0709972690 -0.1098482557 -0.0489227329 -0.0124301684 0.0889808212 -0.0366857218 -0.0472766256 -0.0888530037 0.1588148254 0.0225563030 -0.3611101558 0.0939139349 0.1097750168 0.1859713002 -0.0285314616 -0.0040091953 0.0210605794 -0.0344021421 -0.0415784662 -0.0845385201 -0.2628798884 -0.1750310530 0.0471457471 -0.0542604816 -0.0680067283 -0.0155816356 -0.1003707013 -0.1457958176 0.0264026576 -0.0015455726 -0.0218801206 -0.0453167709 0.0020239394 0.0037130432 -0.0070244067 -0.0065830102 0.0003640522 0.0041900611 0.0003278412 -0.0005667142 -0.0000258778 0.0001726944 -0.0005806405 0.0001486833 -0.0000705500 0.0006361217 -0.0000574374 0.0009311489 -0.0025662282 0.0010328487 -0.0003563594 0.0005085728 0.0001199556 0.0014345621 0.0013229639 -0.0003957407 -0.0010035415 0.0017038503 0.0032091724 -0.0013664093 -0.0021629396 -0.0004172479 0.0005190304 0.0004823687 0.0013675931 0.0010800721 -0.0029506189 -0.0005512369 0.0000486328 0.0242231516 -0.0282409893 -0.0249384585 0.0234996518 0.0089069724 0.0162216182 -0.0069023842 0.0027022812 0.0018187314 0.0000518501 -0.0005285703 -0.0004188375 -0.0020406168 0.0004625209 -0.0002742013 -0.0017214846 -0.0011466749 0.0056938043 -0.0016372514 -0.0286438019 0.0115939000 -0.0165661303 -0.0064112295 0.0062957104 -0.0074670369 -0.0090681342 0.0082741603 0.0236682645 0.0384841730 -0.0211181747 -0.0200691574 -0.0180229233 0.0072506284 -0.0050334209 -0.0155656759 0.0030880659 0.0245010289 0.0439247618 -0.0128731223 -0.0099651206 -0.0080651817 0.0204703652 -0.0066045441 -0.0304538536 0.0400598003 0.0169856286 -0.0068349154 0.0304599677 -0.0058361899 -0.0368298822 0.0006561810 -0.0022543131 0.0022060909 -0.0431400945 -0.0301884046 -0.0157569234 -0.0410555497 -0.0095611675 0.0228796006 -0.0188002638 0.0261581484 0.0206420649 0.0140769759 -0.0010450372 0.0175958804 -0.0031149025 -0.0211617359 -0.0470418300 -0.0126948100 0.0147991559 0.0108510556 0.0229274871 -0.0028329624 0.0313342550 0.0282700155 -0.0247795107 0.0040948961 0.0242457155 -0.0049326391 0.0283508889 0.0007268665 0.0007513150 -0.0011745065 -0.0225686467 0.0262685603 0.0156838403 -0.0302759972 0.0216482200 -0.0163308218 0.0032644007 0.0012243272 -0.0056661137 -0.0042562968 -0.0012690798 -0.0021259996 0.0035209373 -0.0013813016 0.0042473034 -0.0039195170 0.0027647140 0.0023984368 0.0150144334 0.0107382608 -0.0057569351 -0.0027519466 0.0143119206 0.0032307917 0.0148190854 -0.0053759374 -0.0090593756 -0.0069432978 0.0043377719 0.0043749666 -0.0473168438 0.0105051960 0.0270394646 -0.0320252337 -0.0257451970 0.0162839568 -0.0035521771 -0.0105224485 0.0008274759 -0.0017241565 0.0084663655 0.0017035856 -0.0113766578 -0.0097549994 0.0077002776 0.0096989882 -0.0397524055 -0.0090584681 -0.0038636978 -0.0099913874 -0.0017265450 0.0072185409 -0.0116341904 0.0031683236 0.0027410049 0.0088416814 0.0013269283 -0.0043234868 -0.0052779708 -0.0020596376 -0.0205865220 0.0121649064 -0.0158468341 0.0117908696 0.0209623712 0.0050835124 0.0120173755 -0.0013217017 0.0068904345 -0.0070584243 0.0009556159 -0.0040330897 -0.0341122116 0.0023919566 -0.0181732873 -0.0138703945 0.0175027436 -0.0093239737 0.0031303949 0.0022581740 0.0087345925 -0.0008530252 -0.0155861232 -0.0356657812 -0.0004104821 -0.0128096424 -0.0057648202 -0.0256250988 -0.0120998505 -0.0122702551 0.0034118956 0.0011115075 0.0006043900 -0.0258616386 -0.0152607522 -0.0083012238 -0.0077208899 -0.0093947859 0.0118881521 -0.0065331744 -0.0051264400 -0.0012175805 0.0032528787 -0.0054626079 -0.0018315417 -0.0026208967 0.0059614542 0.0034614053 0.0007512821 0.0046097985 -0.0000246329 -0.0022430588 0.0042723402 0.0014116641 0.0016850408 0.0007939898 0.0003513022 0.0013878970 -0.0017734891 0.0014011104 -0.0000819984 -0.0022976757 -0.0001568694 -0.0014788496 -0.0022879039 -0.0006580661 0.0009740734 0.0038760705 0.0001753666 -0.0005499929 -0.0026058780 -0.0009483692 0.0000593268 -0.0009801542 -0.0023082625 0.0004466242 -0.0005557488 -0.0010329680 -0.0023120402 0.0223244079 0.0176883081 0.0153564095 -0.0244321806 -0.0179516485 -0.0121319773 -0.0174616538 -0.0184585445 -0.1037286966 0.0884925974 0.1234002802 0.1843914201 0.1789240630 -0.0350283693 0.0510354490 0.0745992591 0.0236172354 0.0275681905 -0.0307479885 -0.0752121556 -0.0758295490 -0.1437542435 -0.0868108450 -0.0104853276 0.0583454145 0.1019650609 -0.0013792055 -0.0707090684 -0.0983852734 -0.1204316224 -0.0974422445 0.0656568062 0.1126453320 0.2628665229 0.2028909412 0.0747370514 0.0188768970 -0.1160227277 0.1394576804 0.2595535183 0.0888174641 -0.0540872351 0.0351059563 0.0553387123 0.0331137593 0.0026172854 -0.0111548799 0.2185987340 -0.1554620805 -0.2724195507 0.1360129907 0.0841329764 -0.0171956519 0.1502947834 0.0975214240 -0.0277177019 -0.0706696958 -0.0061337857 0.1681951650 -0.0732028835 -0.0852904990 -0.1345382936 -0.0610085018 -0.0098453072 0.1334198201 -0.0648773321 -0.0725634181 -0.1121004683 0.1062399751 0.0108189738 -0.2238933525 0.0866632481 0.0935332306 0.1646618237 0.0087787198 0.0051735533 -0.0531818158 0.0148007253 0.0205687079 0.0344603847 -0.2352569185 -0.1586694887 0.0433919397 0.0649585216 0.0802355537 0.0064871056 0.0158129638 0.0525444384 0.0386283515 0.0006616400 0.0026917054 0.0069978181 -0.0096993234 -0.0029702928 0.0290708352 0.0113216369 -0.0011266851 -0.0106788138 -0.0034676146 -0.0073571374 -0.0030872308 0.0015366849 0.0019641047 0.0011065105 -0.0002605885 -0.0003758624 0.0008095102 -0.0020279185 -0.0063030850 -0.0025186038 -0.0001737784 -0.0003157762 -0.0012445069 0.0056801705 0.0021530441 -0.0017317810 -0.0027340007 -0.0023447062 0.0010323482 -0.0069188915 -0.0014982650 -0.0061688679 0.0008134434 -0.0004914685 0.0029394433 0.0050000413 -0.0005880574 -0.0101235818 0.0050063921 0.0370282347 -0.0362070871 -0.0184845475 0.0616378239 0.0196305913 0.0279958932 -0.0145330797 0.0341627908 0.0027850060 -0.0016699960 0.0025467115 -0.0030811241 -0.0013801235 0.0062612308 -0.0035312451 0.0032519202 0.0008549014 0.0024341112 -0.0005583886 0.0002076762 -0.0105178089 0.0053508051 0.0067932938 -0.0150845250 0.0124205187 0.0299090924 -0.0012229371 -0.0028768978 -0.0046635510 0.0001509506 0.0017300321 0.0024857898 0.0018971161 0.0005421711 0.0012266130 -0.0003250464 -0.0028581078 -0.0055290818 -0.0006538617 0.0002399121 0.0003468682 -0.0017542226 0.0013997121 0.0047357124 -0.0079170716 -0.0051076454 0.0021708191 -0.0052645416 0.0046036029 0.0034108919 0.0019691970 0.0012462581 0.0036356470 0.0107692591 0.0054282666 0.0041636523 0.0076661703 0.0036704313 -0.0047806151 0.0029305950 -0.0039055950 -0.0032400064 -0.0021612933 0.0003136052 -0.0024550545 0.0008592205 0.0027228292 0.0066408862 0.0014656033 -0.0020652504 -0.0018617508 -0.0027578268 0.0002645509 -0.0039917383 -0.0049898442 0.0030533426 -0.0001180734 -0.0027545801 0.0002420423 -0.0028072311 -0.0020916649 0.0011341576 -0.0001016094 0.0025329442 -0.0026906073 -0.0025373443 0.0028518060 -0.0016409971 0.0003124288 -0.0005849113 0.0004592397 -0.0008005573 -0.0011801284 -0.0012340580 -0.0013705079 0.0001889513 0.0000898700 0.0009840862 0.0013782560 -0.0013340197 -0.0016957170 -0.0032634765 -0.0023487710 0.0012821951 0.0008502136 -0.0030481793 -0.0008270484 -0.0035803282 0.0014383991 0.0021965891 0.0013586051 -0.0012484452 -0.0008868363 0.0119736779 -0.0025243067 -0.0069657906 0.0083230548 0.0071582060 -0.0041705320 0.0010290781 0.0023261539 -0.0003901464 0.0003914922 -0.0021282550 -0.0004054078 0.0006042637 0.0027161819 -0.0001417063 -0.0026343992 0.0105419473 0.0024452022 -0.0008365493 0.0011829696 -0.0005041100 -0.0004320982 0.0012140277 -0.0001238552 -0.0009820901 -0.0007695551 -0.0006438498 0.0003915788 -0.0001272034 0.0002525758 0.0077510358 -0.0017515237 0.0057552203 0.0016890759 0.0016172643 0.0008042889 -0.0005663921 0.0004420133 -0.0003725990 0.0008258184 -0.0007775926 0.0005201859 0.0003567812 0.0004727552 0.0001346739 -0.0001812748 0.0022076892 -0.0001875848 0.0040346868 0.0001582315 -0.0060333972 -0.0134266398 0.0235438621 -0.0019295297 -0.0338156781 -0.0256712919 -0.0129738827 -0.0064432994 -0.0039328825 -0.0177392949 -0.0057846605 -0.0011829341 -0.0046195148 0.0516581610 0.0238164292 0.0065585875 0.0208703211 0.0072633198 -0.0224506278 0.0353278677 0.0279440536 0.0097969418 -0.0635502874 0.0333144845 0.0412782247 0.1117073463 -0.1024749696 -0.0607792854 -0.0565793995 -0.0559543672 0.0187740452 0.0400041831 -0.0797603711 -0.0260803585 0.0325396987 0.0409420364 -0.0138096789 -0.0348123564 0.0583448140 -0.0203482814 -0.0394473712 -0.0420501542 -0.0147644848 0.0458499188 -0.0440678714 0.0193633607 0.0459457279 -0.0140350579 0.0301918457 -0.1403979748 -0.0285134275 -0.0548018499 0.0113380657 -0.0010913164 0.0048006417 -0.0078646790 -0.0033437282 0.0029261178 0.0004714126 -0.0019504327 0.0003515379 -0.0009490587 0.0013145441 0.0011215170 -0.0009920740 -0.0009068456 -0.0003797865 -0.0021374389 0.0009144995 -0.0006181741 0.0127154691 0.0120972728 -0.0023656925 0.0040720907 0.0054764033 0.0012605560 0.0029969083 -0.0007261219 -0.0052934450 -0.0056765873 -0.0107680957 -0.0065968443 -0.0010989127 0.0044592171 0.0083061690 -0.0006319099 -0.0055124290 -0.0075488721 -0.0082709604 -0.0058721599 0.0053843234 0.0082387067 0.0190910969 0.0146612349 0.0059460801 0.0010214605 -0.0097383724 0.0108513615 0.0155034375 0.0064617546 -0.0025756261 0.0011333696 0.0021756683 0.0007448126 0.0018837550 0.0039769987 0.0158290388 -0.0098248060 -0.0192117590 -0.0024931724 -0.0022161321 -0.0022398430 -0.0048278039 -0.0032345806 0.0012203073 0.0028785178 0.0004351020 -0.0062244188 0.0023948785 0.0025363021 0.0032968346 0.0018292000 0.0004805069 -0.0019128158 0.0005577557 0.0010925612 0.0028300489 -0.0073664714 -0.0010718818 0.0175288651 -0.0047515057 -0.0051256255 -0.0096852862 0.0016864662 0.0016627368 -0.0035521137 0.0032913537 0.0044230491 0.0080238925 0.0105686726 0.0076145340 -0.0017032925 0.0041942182 0.0050752636 0.0006809272 0.0019003947 0.0066178648 0.0010367036 -0.0435449542 -0.0643069921 -0.1629407070 -0.0000759349 -0.0012888259 -0.0012759255 0.0009745467 0.0007988149 0.0003210453 0.0000960536 0.0004419660 0.0002627398 -0.0004930814 -0.0001433734 -0.0003220354 0.0004319486 -0.0000323020 0.0010452502 0.0022278632 0.0003619361 0.0022368914 0.0002234046 0.0000821599 0.0000186401 -0.0009584563 -0.0003563801 0.0002763056 0.0005475843 0.0000058353 -0.0004033164 -0.0040802109 -0.0008494910 -0.0039047953 -0.0020822027 0.0002712017 -0.0013910410 0.0024292335 -0.0001115798 -0.0036074675 -0.0031753345 0.0012616843 -0.0066881343 -0.0125231108 -0.0101102246 -0.0018753260 -0.0053096621 0.0025268000 -0.0147762599 0.0001601093 -0.0000836311 0.0006359984 0.0001255754 -0.0013534183 0.0001657804 -0.0014226156 0.0004482384 0.0002086182 -0.0016332231 -0.0004436694 0.0004953671 -0.0015883296 -0.0006047846 0.0007942894 0.0000632891 0.0005897056 0.0004407730 0.0270881198 -0.0756801772 -0.1321158962 0.1100970637 0.0788213979 0.0419618146 -0.0794171398 -0.0017783719 0.0579118444 -0.0201255697 -0.0734973348 -0.1214124215 0.0784719271 0.0563185166 0.0369743728 -0.0711711739 0.0105441463 0.0800893484 -0.1487513874 -0.0980414762 -0.0089055448 -0.0449148411 -0.0070065003 0.0300641146 -0.0030544221 0.0048573636 -0.0034271820 -0.0435158229 -0.0097064959 0.0061464960 0.0510043988 0.0144426627 -0.0227975223 -0.0889942941 0.1087407238 0.0647141342 0.0781648255 -0.0245312921 0.0615829752 -0.0023900292 -0.0745789731 -0.1526615965 -0.0629384408 0.0726697523 0.0504871843 0.0790767768 -0.0149059292 0.0949246414 0.1166051338 -0.1300939305 -0.0118844561 0.0596142580 -0.0221517664 0.0485797416 0.0028255076 0.0014645737 -0.0044842254 0.0189619508 0.0034946023 0.0177825670 -0.0456581830 0.0435021278 -0.0160758059 -0.0075553322 -0.0024596369 0.0084507246 0.0141156608 0.0033959290 0.0067905993 0.0100412415 -0.0044063368 0.0108197694 -0.0140462737 0.0100749810 0.0093434352 0.0636915883 0.0559108698 -0.0257803257 -0.0384732040 0.0580051724 0.0278712151 0.0543740022 -0.0502715830 -0.0360596780 -0.0004180069 0.0404337500 0.0042070329 -0.2040223951 0.0108613334 0.1133815520 -0.2082701608 -0.2178921976 0.0985946802 -0.0539774213 -0.0242116204 0.0316995167 0.0088950255 0.0434088778 -0.0020683313 0.1822753488 -0.0860324220 -0.1312291391 0.0925275438 -0.2890044217 -0.0796402358 0.0475689210 0.0251280281 0.0255457586 -0.0340296286 0.0518849434 -0.0192134046 0.0449318931 -0.0254689051 0.0308366508 -0.0020995327 0.0322042399 -0.0044400731 -0.2256133577 -0.0004974247 -0.1550371461 -0.1502737788 -0.1946277615 -0.0705976028 -0.0462196987 -0.0293439538 -0.0241594942 0.0030521767 0.0394356416 -0.0008298350 0.1450192101 -0.0504247062 0.0820227536 0.1044738827 -0.2370246357 0.0741068754 -0.0000473257 -0.0000067676 0.0003795903 -0.0008093676 0.0015373899 0.0011136746 0.0009801266 -0.0006535593 -0.0009105192 0.0018385396 0.0028687169 -0.0008249171 0.0011728058 0.0011290926 0.0001623091 -0.0041117589 -0.0023801285 -0.0022215927 -0.0025834446 -0.0015050739 0.0037293123 -0.0055050269 -0.0052161762 -0.0007188905 0.0816918003 -0.1138404837 -0.0583758716 0.0162644930 0.1371896669 0.0210572603 0.0169527865 0.1188656057 0.0064322163 -0.0799800857 0.1076829942 0.0618853501 0.0937498379 -0.0164962823 -0.0421504392 0.0873486397 -0.0009603946 0.0396163358 -0.1096401531 -0.0843463055 -0.0624756130 -0.0081551006 -0.1193268614 -0.0048735843 0.1108231492 0.0705748830 0.0605360373 -0.0478190002 -0.1319473632 -0.0345734529 -0.0307199209 -0.0226258255 -0.0112538508 -0.0228577298 0.0314466112 0.0105171300 -0.0066936044 -0.0000167805 -0.0008749738 0.0066596267 -0.0075753636 -0.0042696817 0.0082341179 0.0081350816 0.0069323823 0.0111352160 -0.0134944594 -0.0072429053 0.0071336172 0.0053836272 -0.0049647604 -0.0031792438 -0.0029858358 0.0010360634 -0.0005348811 -0.0018186979 0.0001449332 0.0011679347 0.0017720992 0.0008853803 0.0004044378 -0.0004925963 -0.0013307164 0.0012303538 0.0034599499 0.0028669432 0.0032673271 0.0023125989 -0.0040130487 0.0023139308 0.0041230855 0.0021863193 0.0020247551 -0.0016275013 -0.0059316538 -0.0053193165 -0.0111899374 -0.0063368464 -0.0013295629 0.0006005223 0.0006695061 -0.0017763900 0.0007187681 0.0009774071 0.0032591873 -0.0048931760 -0.0046996798 0.0010636705 0.0001682838 -0.0004282865 -0.0004341028 -0.0001969909 -0.0001588008 0.0006958322 0.0005942404 -0.0000536832 -0.0004959289 -0.0009332646 -0.0011341451 -0.0007945398 0.0004650340 0.0029527492 -0.0008046001 -0.0010069166 -0.0018075311 -0.0007940013 -0.0003244330 0.0050440868 -0.0037003793 -0.0012831696 -0.0065666748 0.0021405696 -0.0001698593 -0.0017343920 0.0045481035 0.0047539065 0.0076374488 0.0081814262 0.0045447321 -0.0014187026 -0.0028185214 -0.0031176053 0.0007066377 0.0225120894 0.0204466017 -0.0108842008 -0.0464842358 -0.0357581984 -0.1020812874 -0.0019775502 0.0000880989 0.0022666638 0.0035710972 0.0023415444 0.0002681299 -0.0007217568 -0.0017778270 -0.0012409494 -0.0003854954 0.0002815703 -0.0003565085 0.0007631893 -0.0002646140 0.0008108074 0.0024780787 0.0014964350 0.0015187496 0.0003612347 -0.0000367149 -0.0000063303 -0.0006656776 -0.0004542629 -0.0000392661 0.0007351576 -0.0003812284 -0.0009110280 -0.0031740136 -0.0029363777 -0.0023789629 -0.0064881102 0.0002746903 -0.0011194504 0.0012387107 0.0042092106 -0.0031383584 -0.0088562854 -0.0132794472 -0.0006948796 -0.0034589135 -0.0130197842 -0.0034884519 -0.0155651441 0.0066247294 -0.0086870311 -0.0003598117 -0.0000306165 0.0008178968 0.0003126978 -0.0008133206 0.0000218140 -0.0014054001 0.0009472408 0.0005036336 -0.0038373925 -0.0005594671 0.0053999586 -0.0062472774 0.0019153817 0.0035490585 -0.0026898263 0.0038229273 0.0064200894 -0.0299707163 0.0435600087 0.0734736617 -0.0835581444 -0.0528125620 -0.0168683801 0.0695807938 0.0086814470 -0.0380419093 0.0168835142 0.0412128310 0.0629764699 -0.0690866591 -0.0445370274 -0.0228705876 0.0505808246 -0.0000414896 -0.0415234898 0.1089316457 0.0881057407 0.0211502071 0.0024642555 0.0141660208 0.0221625616 -0.0009710627 -0.0021910603 0.0026555736 0.0939736903 0.0481750560 0.0197440088 -0.0194281847 -0.0008489750 0.0178946184 -0.0762454847 0.0842892019 0.0357272406 0.0724168739 -0.0306783201 0.0414935864 0.0049054056 -0.0494076715 -0.0913731235 -0.0605555780 0.0649155247 0.0377784218 0.0573155954 -0.0167858252 0.0538071109 0.0938415983 -0.1246432451 -0.0304419700 0.0188943987 -0.0180332645 -0.0044445253 -0.0008833134 0.0016041620 -0.0035996247 0.0728489528 -0.0570444647 -0.0184705652 -0.0156009814 0.0163251844 -0.0111532777 0.0040856814 0.0012949423 -0.0044520869 -0.0066650762 -0.0015472964 -0.0026206649 0.0061007559 -0.0026786343 0.0064770541 -0.0079631495 0.0055420103 0.0046622094 -0.0673261520 -0.0831616955 0.0215176958 0.0164550141 -0.0715168213 -0.0189264851 -0.1032709513 0.0395367083 0.0628615251 0.0437132336 -0.0178445358 -0.0268402350 0.2753861864 -0.0557527000 -0.1541427160 0.1919529547 0.1595866681 -0.0960872498 0.0094018325 0.0690050689 0.0035554235 0.0215412725 -0.0686639432 -0.0183674055 0.0637999462 0.0635537730 -0.0434571507 -0.0565201391 0.2599808536 0.0541985953 0.0425921678 0.0610607635 0.0224979080 -0.0403176745 0.1101244127 -0.0194635925 -0.0038994157 -0.0687592127 0.0010660478 0.0396516190 0.0604421314 0.0175898974 -0.0006794838 -0.0769407101 0.0115084827 -0.1555058679 -0.2486081212 -0.0680992038 -0.1124239214 -0.0100167309 -0.0626543486 0.0444009310 0.0087618518 0.0245435629 0.2772292622 -0.0455881247 0.1493768486 0.1412163608 -0.2426964125 0.0970882282 0.0000137529 -0.0007867488 -0.0019755418 -0.0003885422 0.0037597217 0.0056300735 -0.0028118644 0.0042232827 0.0047232518 0.0047546372 -0.0007650001 0.0047404763 -0.0002042831 0.0003369292 -0.0012788863 -0.0033050889 0.0031887894 0.0021678097 0.0063797933 -0.0054665803 -0.0012162276 0.0068625192 0.0012438722 0.0098295320 -0.0001602889 -0.0014727085 -0.0002053753 -0.0024629702 0.0016190510 0.0013823737 0.0005469551 0.0008941045 -0.0001244807 0.0006919736 0.0013705406 -0.0001788696 -0.0001044787 -0.0003501391 0.0000027387 0.0005908363 -0.0006711036 0.0001973697 -0.0003606801 -0.0007462958 -0.0000747508 -0.0001872131 -0.0010205099 -0.0000360674 0.0009148341 0.0015336956 0.0005134536 -0.0011550370 -0.0010478792 -0.0008057032 -0.0006415490 -0.0001365968 0.0000538835 -0.0005833370 0.0006128677 -0.0000931951 0.0007428724 -0.0013829121 -0.0007605836 -0.0011139182 0.0018637766 0.0009835554 0.0000513012 0.0005506659 0.0008246501 0.0025891462 -0.0053455494 -0.0085226319 0.0136479632 0.0124022271 -0.0062500799 -0.0003580322 0.0004102338 0.0016447805 0.0031443676 -0.0039615795 -0.0070883974 -0.0027868894 -0.0052982033 -0.0029297229 0.0002093602 0.0034053862 0.0049075921 -0.0000980928 -0.0018479202 -0.0025767405 -0.0013943231 0.0004962453 -0.0009353731 0.0070306139 0.0162228384 0.0117526148 0.0048580718 0.0011126691 -0.0097020663 -0.0001030097 -0.0019010163 -0.0030731683 -0.0051948974 0.0039789697 0.0042463135 0.0007437352 0.0020980220 0.0107270566 0.0198234823 -0.0005810759 -0.0405572065 0.0021817876 -0.0004877411 -0.0045129542 -0.0008585959 -0.0002358917 0.0012712249 0.0022763655 0.0004679413 -0.0034307701 -0.0010241938 -0.0012020120 -0.0022799400 0.0009844273 0.0015763767 0.0020644409 -0.0022283090 -0.0022632280 -0.0009310386 -0.0124542140 0.0037384456 0.0199744408 -0.0039367751 0.0007227523 -0.0049872285 0.0020258598 -0.0006211775 0.0042675269 0.0051651055 0.0081752640 0.0142713527 0.0062750217 0.0048000633 0.0002157966 -0.0007085880 -0.0007472021 0.0027646782 0.0356909552 0.0300999792 -0.0180655559 -0.0001365883 -0.0001879218 -0.0001818768 0.0173574939 -0.0243506159 -0.0580540004 -0.1012487879 -0.0790487905 -0.0194107325 0.0228938698 0.0557063623 0.0410541169 0.0001424629 -0.0008863880 0.0010344700 -0.0009631479 -0.0022395313 -0.0017081717 0.0016812725 -0.0046995070 0.0012036272 -0.0029596047 -0.0063796453 0.0025807246 0.0351505622 0.0153718711 -0.0070854437 -0.0341506892 0.0091630621 0.0348811851 0.0066404568 0.0033739117 0.0033667255 0.0021697959 -0.0033691236 0.0144271561 -0.0046941581 0.0017512092 0.0038711488 -0.0031253771 0.0157185782 -0.0281192124 -0.0220357219 0.0217618532 0.0089403667 -0.0048275729 -0.0027692019 -0.0009302865 -0.0156569729 0.0020335517 -0.0198351000 0.0101671837 0.0449975822 -0.0302618312 0.0418256660 -0.0029869873 0.0052579138 0.1514899321 0.0315085433 -0.1411640747 0.1983011772 -0.0133739328 -0.1059211548 0.0743212182 -0.1259245383 -0.1975573540 0.0003947471 0.0006901075 0.0005211557 -0.0009384283 -0.0005204111 -0.0001853567 0.0008763129 -0.0000089866 -0.0006442900 -0.0003039364 0.0003780325 0.0008641506 -0.0010612115 -0.0004808350 -0.0000023186 0.0010397736 0.0000783708 -0.0007059548 0.0016309979 0.0008055876 0.0005283921 -0.0011470705 -0.0000715956 0.0012954837 0.0014130466 0.0003123875 -0.0003918765 -0.0001117281 0.0000955110 0.0002767430 -0.0012057869 0.0000273532 0.0013419434 -0.0001542750 0.0001136521 -0.0000482135 0.0003356413 -0.0000726078 0.0004117484 0.0000863998 -0.0001360068 -0.0000995703 -0.0006282192 0.0002181492 -0.0001826152 0.0005432706 -0.0003347759 0.0002720356 -0.0004195017 0.0003414137 0.0000595416 0.0001756149 0.0008041261 -0.0005152479 -0.0016234675 0.0012011928 -0.0000343017 0.0014889322 -0.0001112403 -0.0012447603 -0.0006703478 0.0001980285 -0.0009087217 -0.0002965056 0.0000165864 0.0009720022 -0.0007174957 -0.0002705125 -0.0007337386 0.0005123571 -0.0001604149 0.0011685413 0.0007141006 -0.0009077924 -0.0011016318 -0.0005439932 -0.0005493331 0.0002052301 -0.0001776022 -0.0003980105 0.0000447897 -0.0001839387 0.0002841472 0.0001371982 0.0000416616 -0.0001958924 -0.0000437430 0.0006015574 0.0000893873 -0.0003028499 0.0008995088 0.0008237180 -0.0004093410 0.0003251165 0.0001909364 -0.0001665013 -0.0000848115 -0.0000456714 0.0000481674 0.0000829395 0.0002696242 -0.0000377807 -0.0002550312 0.0007592220 0.0002629981 -0.0000915451 0.0004816257 -0.0000694706 -0.0004137267 0.0005148359 -0.0002191782 -0.0004950439 -0.0005234021 -0.0002580405 0.0004224320 0.0002172807 0.0002288376 0.0018871203 -0.0008537954 0.0012930130 -0.0000800865 -0.0006926064 0.0000679333 -0.0008785834 0.0002218497 -0.0004957054 0.0004782070 0.0000059134 0.0002725350 0.0030089427 -0.0000943230 0.0016174266 0.0009694172 -0.0011273462 0.0006800356 0.0433656431 0.0608822274 0.1050960239 -0.0123320474 -0.1559404545 -0.4389478209 -0.0696850230 -0.3150132874 -0.2339638859 -0.3725577934 -0.1049794353 -0.2685177446 0.0441758524 0.0339243144 0.0049772433 -0.1889014975 -0.1322263490 -0.1000655230 -0.1428768640 -0.0868091558 0.1677610572 -0.1849232494 -0.1592467213 -0.0540008350 -0.0067260214 0.0129104543 0.0046182480 0.0010305593 -0.0067446848 -0.0032353292 0.0063163339 -0.0067914168 -0.0036939375 0.0093034875 0.0056730323 -0.0025162304 -0.0141717962 -0.0077555489 0.0049301053 0.0121310211 -0.0083219740 0.0056645646 -0.0093092464 0.0103220764 -0.0043086709 -0.0077294021 -0.0013958977 -0.0034720792 0.0079867375 0.0012241913 0.0033955507 0.0153375895 -0.0049404312 0.0056236684 -0.0025027399 -0.0004556287 -0.0002173263 0.0024839969 -0.0016400410 -0.0006171982 -0.0000376435 -0.0052010522 -0.0048422124 -0.0031987395 0.0051706621 0.0033122571 -0.0005327904 0.0021162639 0.0085496107 0.1244136131 -0.1109699678 -0.1465914005 0.1111431185 0.0879066660 -0.0644845990 -0.0347324001 -0.0292295074 0.0165059618 -0.0042958438 -0.0276523543 -0.0177775451 0.0058467246 0.0009895299 -0.0055806159 0.0056413658 0.0084102441 0.0024346588 0.0145084846 0.0259537167 0.0118201120 0.0129822583 0.0165292939 -0.0269366395 0.0370766185 0.0721826937 0.0384772516 0.0402970232 -0.0118751306 -0.0826570440 -0.0313768232 -0.0773495935 -0.0547891642 0.0126837700 0.0089689094 0.0069651453 -0.0443973763 0.0073097292 0.0514688454 0.0305291276 -0.0101570524 -0.1518044822 0.0099546344 -0.0010396378 -0.0226226109 0.0050537149 0.0040976937 0.0023312708 0.0078744829 0.0057566122 0.0030915891 -0.0032578321 -0.0075808606 -0.0222253204 -0.0036706055 0.0058944297 0.0329733301 -0.0182461119 -0.0192004146 -0.0250099141 -0.0169348731 0.0072696349 0.0554600760 0.0164939573 0.0206925463 0.0166274666 0.0295869243 0.0096357831 -0.0408661332 0.0458877426 0.0555853222 0.0925864856 0.0533891927 0.0353847972 -0.0050089591 -0.0197581960 -0.0234237638 0.0251201359 0.2953127899 0.3247514394 -0.1956379568 -0.0021777093 0.0015296350 -0.0009344920 0.0261849600 0.0100355099 -0.0011080316 -0.0624240012 -0.0463354667 -0.0098106523 0.0115195720 0.0220498148 0.0157769198 0.0006124008 0.0003746816 0.0003146179 -0.0023021895 -0.0049513622 -0.0029679653 0.0014434162 -0.0046808098 -0.0008955319 -0.0007523467 -0.0045428606 0.0031529477 0.0228641034 0.0115391536 -0.0023596946 -0.0262790721 0.0070739556 0.0266430116 0.0401313629 0.0359659721 0.0256295422 0.0115497075 -0.0044015742 -0.0189069615 -0.0264370355 0.0211058532 0.0357139462 -0.0089338236 0.0093403805 -0.0314301157 -0.0135182602 0.0440490708 0.0145236320 -0.0022147273 -0.0033364377 0.0279485890 -0.0250645345 0.0084725080 -0.0273522808 0.0071044993 0.0446971769 -0.0176159909 0.0276875406 -0.0132401350 -0.0018552260 0.1203334308 0.0256922077 -0.1125881330 0.1575935885 -0.0115685218 -0.0841957384 0.0601536053 -0.1012962932 -0.1578545763 0.0021601527 0.0008906530 0.0011873962 0.0044848372 0.0016524901 -0.0015544231 -0.0050431720 -0.0015988704 0.0008086485 -0.0009801899 0.0004147305 0.0014998766 0.0040031833 0.0019874457 0.0001676212 -0.0019466480 -0.0012934867 -0.0008250561 -0.0049453897 -0.0063768478 -0.0035914373 0.0042002271 -0.0032711185 -0.0065356710 0.0000915324 -0.0003974810 -0.0007647261 -0.0108585459 -0.0070866305 -0.0038284078 -0.0001130717 -0.0016281087 -0.0025865926 -0.0018469026 0.0018660020 0.0007104419 0.0006804906 -0.0009601168 -0.0008791224 0.0010488464 -0.0007503528 0.0001043731 -0.0003541630 0.0007563119 0.0011490676 -0.0007289248 0.0000508551 -0.0009519669 0.0046714815 -0.0050089333 -0.0020897492 0.0043603127 -0.0016391125 0.0013620837 -0.0011746853 0.0009508744 0.0009252894 0.0052140797 -0.0037375028 -0.0010887093 0.0025146003 -0.0019967703 0.0026885477 0.0000207288 0.0000903782 -0.0000205835 0.0001452613 0.0001326947 0.0001766497 0.0000984546 -0.0000210393 0.0000501342 0.0005027646 -0.0006655241 -0.0008643673 -0.0012281016 -0.0066219224 0.0000557400 0.0031475913 0.0043607460 -0.0015399804 0.0092613783 0.0028474871 -0.0049227635 -0.0055905761 -0.0002295479 0.0031524564 -0.0309102314 0.0135001603 0.0182364410 -0.0062003760 0.0005779237 0.0037393262 0.0075714328 -0.0065018897 -0.0053375935 -0.0053867508 0.0024228917 0.0034243542 -0.0364757916 0.0036624371 0.0246201371 -0.0067441163 0.0038788714 0.0044637719 -0.0001766393 0.0015497771 -0.0004886251 0.0012033691 -0.0032688326 0.0008834037 -0.0085732035 -0.0029703014 -0.0050227321 0.0061778817 0.0027452874 0.0033769578 0.0266207473 -0.0070206427 0.0192124877 0.0032598615 -0.0031286029 0.0022304782 -0.0076703797 0.0048433653 -0.0045117919 0.0045778908 -0.0037906708 0.0028189236 0.0247515234 0.0024217429 0.0128781833 0.0037391016 0.0005310371 0.0022261167 -0.0453770171 -0.0377876607 -0.0613793742 0.0343145281 0.0534335335 0.3140841414 0.1206360803 0.2456987148 0.1498306079 0.2720529796 0.0983031637 0.2076412543 0.0381766646 0.0218982715 -0.0132875670 -0.1915851344 -0.0459319873 -0.0258238096 -0.1471991210 -0.0789734047 0.1417232921 -0.1327979610 -0.1691137512 0.0302917700 -0.0681228711 0.1031064424 0.0423975031 -0.0313093400 -0.0443528989 -0.0077761906 0.0684228275 -0.0556508815 -0.0377334601 0.0920764771 0.0739218124 -0.0282845626 -0.1407736025 -0.0699538675 0.0536438687 0.1122111949 -0.1074172885 0.0518208351 -0.0680157378 0.0812490102 -0.0291243509 -0.0766288111 -0.0371404199 -0.0350749639 0.0948569630 0.0788469599 0.0441231110 0.0114189982 -0.0570187032 -0.0156862555 -0.0294998499 -0.0087772041 -0.0129602556 0.0247711994 -0.0160275830 -0.0116123113 -0.0004227144 -0.0013063316 0.0019047420 -0.0003026922 0.0008048439 -0.0017673129 0.0016174365 0.0010738139 -0.0016375087 -0.0018629085 0.0037879973 0.0072039516 0.0053690873 0.0051438735 -0.0018292875 -0.0014334938 -0.0004650337 0.0018013663 -0.0023370788 -0.0018995951 0.0004104600 -0.0003368788 -0.0009411553 -0.0008037054 0.0008858437 0.0004308256 -0.0010033162 0.0010643187 0.0009161702 -0.0003181624 -0.0003437696 -0.0014662467 -0.0012279209 0.0022839510 0.0051206381 0.0033031420 0.0007123241 0.0008291094 -0.0001550105 0.0014121380 0.0010397707 -0.0002187805 -0.0004126555 0.0007008061 0.0021614048 0.0027553839 0.0006008680 -0.0089022834 -0.0085057263 -0.0034231857 0.0319876074 -0.0007570236 -0.0003361683 0.0031000454 -0.0001153386 -0.0002300792 -0.0005332947 -0.0016220728 -0.0008215688 0.0001211112 0.0003869338 0.0010232967 0.0029541707 0.0003299372 -0.0009730365 -0.0044254237 0.0023801154 0.0027368060 0.0034813053 0.0040837651 -0.0022477320 -0.0094084194 -0.0013357930 -0.0015214131 -0.0001334163 -0.0042682181 -0.0011070244 0.0049229493 -0.0068171061 -0.0086382140 -0.0137690179 -0.0091242638 -0.0060630815 0.0008862693 0.0007092358 0.0008111422 0.0003518336 -0.0005115626 0.0064751674 -0.0012771459 -0.0185932279 0.0087756451 0.0019655824 -0.0152902614 -0.0052404967 0.0039514643 0.0300256869 0.0212360507 0.0039566577 -0.0058767499 -0.0112286137 -0.0078824848 0.0000508514 -0.0000387735 -0.0004022468 0.0010840114 0.0015389997 0.0010123893 0.0006061256 0.0008328486 -0.0010700384 0.0005864032 0.0022085330 -0.0010690511 -0.0093884406 -0.0051598677 0.0005269914 0.0122748232 -0.0034256053 -0.0127701527 -0.0121736483 -0.0140557407 -0.0064512783 -0.0090091503 0.0017763873 0.0044208199 0.0074659915 -0.0018484552 -0.0112637744 -0.0067212853 -0.0129556054 0.0036183371 0.0072395714 0.0042933601 0.0003505907 -0.0075135210 0.0031402834 0.0127875151 0.0111965817 -0.0025329014 0.0080870407 -0.0039687041 -0.0203534432 0.0105432338 -0.0157069539 0.0024920096 -0.0011029702 -0.0576119651 -0.0120348365 0.0553313529 -0.0775289719 0.0057823882 0.0413123407 -0.0300310566 0.0495831049 0.0799751083 0.0200657367 0.0067091270 0.0056532060 0.0415028292 0.0168858437 -0.0084120661 -0.0392710496 -0.0140270791 0.0055084329 -0.0082796065 0.0002094978 0.0080252046 0.0378917474 0.0185145838 0.0017887217 -0.0212613325 -0.0107098522 -0.0029492136 -0.0747914082 -0.0656537865 -0.0360130588 0.0140471450 -0.0173359130 -0.0467224472 0.0032454476 -0.0008560866 -0.0001726102 -0.0897859964 -0.0561917085 -0.0332559443 0.0010441605 -0.0143470784 -0.0232958998 -0.0361922586 0.0290129878 -0.0033451345 0.0347123033 -0.0230787389 0.0039602478 0.0083702278 -0.0049148745 0.0027666995 -0.0325230757 0.0279043898 0.0063179238 0.0193793550 -0.0147487130 -0.0019093129 0.0541083552 -0.0780631994 -0.0429662374 -0.0127137825 -0.0113074654 -0.0398090661 -0.0046321678 0.0017584825 -0.0006556770 0.0684522984 -0.0682713135 -0.0387546754 -0.0046936607 -0.0096124336 -0.0228541644 0.0004434067 0.0000948582 -0.0014352892 -0.0014247307 -0.0003411371 -0.0014589020 0.0004170092 -0.0001051526 0.0003566884 0.0013788536 -0.0013269087 -0.0022955917 -0.0151861963 -0.0697283726 0.0012978914 0.0260021322 0.0348308178 -0.0127137215 0.0851421382 0.0335439210 -0.0445134246 -0.0566645763 -0.0078922698 0.0314519456 -0.2771253123 0.1307366531 0.1643487745 -0.0372971971 0.0312066912 0.0261245081 0.0810072193 -0.0582217064 -0.0564785039 -0.0515688385 0.0192011708 0.0323894287 -0.3589919578 0.0446222690 0.2462980231 -0.0729657182 0.0686008244 0.0511272913 -0.0147594263 0.0440919009 -0.0132670960 -0.0057983205 -0.0558990308 0.0004935381 -0.0884048031 -0.0332288976 -0.0519462993 0.0565626076 0.0080630270 0.0323903080 0.3385689828 -0.0815692226 0.2398671448 0.0684448160 0.0095305476 0.0394571453 -0.0749444234 0.0541023804 -0.0446628606 0.0496448519 -0.0247285933 0.0294299458 0.3010581726 0.0256257671 0.1597036597 0.0516555994 -0.0051349704 0.0314693963 0.0184809211 0.0136507486 0.0205927090 -0.0168858128 -0.0109227634 -0.1157887837 -0.0589562823 -0.0895095641 -0.0473630576 -0.0956996355 -0.0410601752 -0.0686267340 -0.0078450685 -0.0042017133 0.0015546904 0.0454829930 0.0186885270 0.0116837725 0.0441059858 0.0193039515 -0.0386720564 0.0397360699 0.0415320127 0.0041089689 0.0054619574 -0.0005207099 -0.0022727568 0.0136389911 -0.0019266669 -0.0059405911 -0.0054893736 0.0016107399 0.0026551415 -0.0072628147 -0.0079641886 0.0032069262 0.0100770095 0.0020903440 -0.0046947690 -0.0047565637 0.0137272401 -0.0019679957 0.0001408030 -0.0017763538 -0.0007415941 0.0052841262 0.0058711853 0.0024299315 -0.0091009734 -0.0185307689 -0.0045936577 0.0272843125 0.0040120121 0.0156613556 0.0024966480 0.0007319652 0.0018027008 -0.0013483429 0.0008277728 0.0017117568 -0.0012222001 -0.0047491218 -0.0056394403 -0.0023467198 0.0038809795 0.0031372290 -0.0006283104 0.0020120288 0.0103555818 0.1403650202 -0.1224859853 -0.1430514669 0.1496147637 0.1197101731 -0.0853042798 -0.0483658140 -0.0397041215 0.0247675038 -0.0139155955 -0.0411219054 -0.0210775119 0.0089776381 0.0021588384 -0.0086666999 0.0093182128 0.0102389095 -0.0011651179 0.0220544275 0.0377226280 0.0153701069 0.0145987589 0.0164952808 -0.0337892541 0.0492090692 0.0924424605 0.0476450220 0.0511025904 -0.0134237582 -0.1050082513 -0.0338694714 -0.0982989417 -0.0696519035 0.0156543580 0.0128894275 0.0152807769 -0.0427793368 0.0134095068 0.0256693667 0.0038547134 -0.0326479010 -0.0437741007 0.0064228166 -0.0044520673 -0.0135511449 0.0034363244 0.0026795669 0.0012888875 0.0038852300 0.0043708469 0.0035570140 -0.0021892780 -0.0049037558 -0.0147541795 -0.0022110902 0.0036404565 0.0212607751 -0.0117835815 -0.0115838308 -0.0164591325 0.0005301876 -0.0029820377 0.0278663613 0.0172524517 0.0188434283 0.0219540077 0.0186326572 0.0091037505 -0.0293093802 0.0296394550 0.0336186136 0.0572254255 0.0347088847 0.0216528789 -0.0031184358 -0.0227183481 -0.0263268505 0.0311742408 0.3688715573 0.4068549083 -0.2447240125 0.0003653599 0.0001946004 -0.0033350085 -0.0520253759 -0.0197244275 0.0144787346 0.0828782963 0.0599916945 0.0140637593 -0.0168713161 -0.0325463936 -0.0235096729 -0.0003131521 -0.0001564296 -0.0006445884 0.0023534997 0.0010311556 0.0011487443 -0.0054157777 0.0080047773 0.0048766747 0.0015463399 0.0079371565 -0.0047482845 -0.0219485931 -0.0141496110 -0.0010907563 0.0341753498 -0.0091571819 -0.0355527690 -0.0053606606 -0.0119627362 -0.0006825358 -0.0227517055 0.0031837097 -0.0105334849 0.0013586648 0.0148077697 -0.0049174103 0.0349876740 0.0129692053 0.0563682480 0.0138563113 -0.0994688055 -0.0299952281 0.0261525957 -0.0015895141 -0.0880771623 0.0461031467 -0.0128526587 0.0367885687 -0.0140848928 -0.0793146008 0.0351606216 -0.0545801341 0.0150147938 -0.0010277432 -0.1645259821 -0.0337360482 0.1586141125 -0.2230118125 0.0150113775 0.1188472530 -0.0868056414 0.1425448363 0.2340357573 -0.0020262783 -0.0006845000 0.0007966925 -0.0009961408 -0.0006910713 -0.0005711457 -0.0004286530 0.0004801588 0.0008606497 0.0013166632 0.0005405173 -0.0000990806 -0.0001900309 -0.0004050361 -0.0005876336 -0.0004127435 -0.0000407194 0.0002814813 0.0056209530 0.0026633582 0.0011882423 0.0054826347 -0.0001385938 -0.0032170754 -0.0036051958 -0.0010959139 -0.0002047380 0.0029009978 0.0011976082 0.0001311408 0.0018866685 -0.0001131132 -0.0017016227 0.0073497378 -0.0047347506 0.0026565032 -0.0090658677 0.0049288956 -0.0032285678 0.0000517017 -0.0005539945 -0.0012251422 0.0092131034 -0.0061477328 0.0016736142 -0.0084274652 0.0052463161 -0.0019022972 -0.0071261914 0.0127587149 0.0092858994 0.0112656983 -0.0015151942 0.0152874970 0.0005452976 -0.0004197748 -0.0009761382 -0.0088358649 0.0111127537 0.0104553635 0.0113540740 -0.0016171826 0.0161477408 0.0006995195 0.0000477481 -0.0017851447 0.0018646633 0.0008141353 0.0019700266 0.0001730638 0.0000340188 0.0006218253 -0.0005681719 0.0007419399 0.0008686560 0.0013311962 0.0032786159 -0.0003774883 0.0000430496 0.0002341024 0.0000413609 -0.0052001475 -0.0026631712 0.0026569360 0.0044011254 0.0020164352 -0.0023148693 0.0125775504 -0.0076377865 -0.0075197632 -0.0013870640 -0.0060495873 0.0000585605 -0.0065618372 0.0030368013 0.0044823482 0.0033078419 -0.0016501603 -0.0021005195 0.0209645879 -0.0035759483 -0.0149007653 0.0050792720 -0.0069871179 -0.0038434723 0.0035751126 -0.0101827019 0.0026290176 0.0038956033 0.0109365833 0.0016121640 0.0054320704 0.0028848968 0.0031799840 -0.0021168256 0.0039760698 -0.0015851698 -0.0366385281 0.0075381116 -0.0250923826 -0.0114229952 -0.0086030842 -0.0057884685 0.0035563085 -0.0047361861 0.0022715806 -0.0033314054 -0.0019531919 -0.0017215807 -0.0316568979 -0.0019476216 -0.0173467037 -0.0060976640 0.0030015030 -0.0038075541 0.0453478579 0.0281979237 0.0378676478 -0.0507328457 0.0095447413 -0.2414070915 -0.1720929271 -0.1857138765 -0.0735726817 -0.1824679279 -0.0986845983 -0.1169531275 0.0162802820 0.0117684761 -0.0089657326 -0.0274581375 0.0236438004 0.0144502697 0.0150616453 -0.0065105272 0.0056796050 0.0064497092 -0.0253747729 0.0474152718 0.0009869764 -0.0076035667 -0.0012914727 -0.0111869872 0.0033870033 0.0065291605 -0.0024296027 0.0013083128 0.0012574580 -0.0015599713 -0.0025890192 -0.0005720723 0.0024604494 0.0065403698 -0.0004361487 -0.0055632626 -0.0067063010 -0.0027418053 0.0025279860 -0.0009582262 0.0016142350 -0.0000845248 0.0022399479 0.0000902807 -0.0002813385 0.0069892581 -0.0007402432 -0.0226024392 0.0054935088 -0.0119471479 0.0022308695 0.0016682753 0.0015179282 -0.0000070456 -0.0002998176 0.0002410281 0.0006119581 -0.0035052916 -0.0032066828 -0.0024929527 0.0042516138 0.0036568400 0.0010036689 0.0018381798 0.0031826892 0.0203252254 -0.0148302867 -0.0188726831 0.0221790492 0.0175641772 -0.0130836422 -0.0081073200 -0.0068374300 0.0038683451 -0.0029312014 -0.0064927981 -0.0028910701 0.0022219376 0.0015388999 -0.0009966943 0.0015697311 0.0011142017 -0.0010487311 0.0038003191 0.0066394410 0.0029749681 0.0020989399 0.0022783824 -0.0047694570 0.0065895012 0.0114313547 0.0048526725 0.0074216659 -0.0022063082 -0.0157429353 -0.0059174402 -0.0166166605 -0.0116207447 0.0041539162 0.0014789934 0.0019959458 -0.0068997945 0.0024591111 0.0002300700 -0.0087518112 -0.0038547872 0.0141437174 -0.0024350371 -0.0028316536 0.0001273532 -0.0029885231 -0.0018028325 0.0008789326 0.0017983423 0.0005670878 -0.0031602833 0.0013010401 0.0014852429 0.0002091571 0.0008316619 0.0008224182 -0.0004805169 0.0012645728 0.0012171254 0.0015006354 0.0002284993 -0.0003842937 0.0017951641 -0.0012535591 -0.0023744662 -0.0051113547 0.0015888334 -0.0055930693 0.0070003728 0.0019689266 0.0020500228 0.0028030096 0.0062160371 0.0049454234 -0.0007789377 -0.0034049705 -0.0040687114 0.0046168252 0.0535635842 0.0633662680 -0.0379617336 0.0012024489 0.0014807148 0.0057600324 -0.0000631636 0.0012870107 0.0000797152 0.0087171590 0.0031120234 -0.0026110540 -0.0019639703 -0.0017464979 -0.0005833685 0.0008549667 -0.0023802261 -0.0015331742 -0.0140840581 0.0122554294 0.0076856934 0.0276898004 -0.0371949798 -0.0289178421 0.0104333038 0.0002491133 0.0109382713 -0.0043053987 -0.0009455153 0.0015818230 0.0033383986 -0.0005511268 -0.0036936564 -0.0697655979 0.0392170892 -0.0738341340 0.1880085652 -0.0017824856 0.0342321271 0.0687773094 -0.1870063756 -0.0550529466 -0.1980467695 -0.0655893323 -0.3187113477 -0.0645052532 0.5776367656 0.1704970588 -0.0866776289 -0.0009294794 0.5368710790 -0.0642572253 0.0521593761 -0.1413563401 -0.0129387262 0.0622775234 0.0591585713 -0.0560576473 -0.1164179423 -0.0606607385 -0.0122104112 -0.0034523156 0.0040094594 -0.0221346704 -0.0078689846 0.0106171301 -0.0043558834 0.0084475380 0.0255509851 -0.0000228707 -0.0004368395 -0.0019650604 -0.0026874302 -0.0005713318 0.0014545897 0.0035113092 0.0008761715 -0.0012031047 -0.0001524690 -0.0006688843 -0.0012740919 -0.0037420492 -0.0011227253 0.0010723930 0.0033599632 0.0011872135 -0.0004577325 0.0036317081 0.0039483582 0.0031053722 -0.0053434001 0.0014997786 0.0067349695 -0.0006673118 0.0000141532 0.0000915398 0.0053650011 0.0039907589 0.0039510764 -0.0039698569 0.0018912719 0.0058838629 -0.0073718339 0.0038340004 -0.0032242658 0.0083380696 -0.0046654951 0.0026668583 -0.0007634127 0.0021458233 0.0036399166 -0.0074185224 0.0038823580 -0.0037781114 0.0088014380 -0.0055387685 0.0018658224 0.0070096322 -0.0108821473 -0.0102105478 -0.0085180355 0.0016180049 -0.0142549544 -0.0003738614 0.0007503780 0.0036163012 0.0048430641 -0.0093819921 -0.0102908474 -0.0195023503 0.0014136679 -0.0209729984 0.0000755169 -0.0000078021 -0.0001885110 0.0005103986 0.0001904539 0.0004632753 -0.0008832867 0.0002211922 -0.0024590317 0.0010787954 -0.0013771944 -0.0014580593 0.0014883686 0.0085559337 0.0002376326 -0.0031304391 -0.0053380615 0.0012511653 -0.0005719331 -0.0019165953 0.0001438063 -0.0002373070 -0.0019985403 -0.0000366853 0.0123435336 -0.0052323370 -0.0076034919 0.0023147252 0.0006949372 -0.0013065002 -0.0009394839 0.0011449696 0.0006670513 0.0009153228 0.0025349316 -0.0003378882 0.0152229616 -0.0026214886 -0.0104883188 0.0033784171 -0.0058778491 -0.0024657047 -0.0014977036 0.0104927152 -0.0012097618 -0.0023801804 -0.0138190932 -0.0010552925 0.0061159496 0.0005380811 0.0036830922 -0.0049533567 -0.0062078684 -0.0023500621 0.0019118045 0.0011668964 0.0003502877 0.0030732409 0.0063158856 0.0009593315 0.0070903177 -0.0005491458 0.0039356999 -0.0037876600 0.0066685145 -0.0025932838 0.0028864254 -0.0005124201 0.0024802938 -0.0002602982 -0.0034726462 0.0000818148 0.0042719788 0.0036235765 0.0079949128 -0.0073960506 -0.0048965278 -0.0388298692 -0.0110535880 -0.0326265847 -0.0220158810 -0.0306572017 -0.0045268339 -0.0296498246 -0.0151377170 -0.0090432585 0.0024677784 0.0419002508 0.0278704338 0.0258717454 0.0668699195 0.0215734791 -0.0606259158 0.0577665779 0.0500431990 0.0260258262 -0.0042462012 0.0823731251 0.0107480025 0.1521077639 -0.0330416981 -0.0854452442 0.0254249010 -0.0052288884 -0.0120166466 0.0141826680 0.0268978819 0.0098645220 -0.0135797784 -0.0804630415 -0.0036418165 0.0326089230 0.1496022612 0.0164426662 0.0048209690 -0.0103350736 -0.0024404523 0.0358997564 -0.0247572843 0.0162344080 -0.0304112797 -0.1583751424 -0.0177574501 0.4046202405 -0.0733342468 0.2121133286 -0.0251867850 -0.0173256105 -0.0091433936 -0.0080322031 0.0123129048 0.0026806951 -0.0039816645 -0.0002742947 0.0004588217 0.0031904380 -0.0033649738 -0.0025155068 0.0040955736 0.0038990265 0.0019973564 -0.0104330290 0.0087640584 0.0169976238 -0.0068166284 -0.0046740637 0.0056139633 0.0031397482 0.0034770423 -0.0003158184 -0.0003603099 0.0018121975 0.0019634555 -0.0017808685 -0.0020494727 -0.0003776610 0.0000977368 0.0001095189 -0.0001923036 -0.0013697811 -0.0034113192 -0.0022078668 -0.0010038392 -0.0021719430 0.0014174908 -0.0007158171 -0.0007840811 0.0013385311 -0.0033351511 0.0023271517 0.0096636344 0.0041644926 0.0115936537 0.0063510592 -0.0021671614 -0.0001852674 0.0002323357 0.0046701257 -0.0012633724 -0.0061235059 -0.0055330559 0.0018305898 0.0194130220 -0.0015623349 -0.0002824742 0.0024140528 -0.0008954704 -0.0007620061 -0.0005377334 -0.0005646279 -0.0006872597 -0.0011594641 0.0006258728 0.0012853879 0.0029887814 0.0003105423 -0.0006544877 -0.0036186806 0.0026505476 0.0027188995 0.0037310190 0.0010306248 -0.0000267286 -0.0066133974 -0.0034130801 -0.0038887573 -0.0052598013 -0.0039931966 -0.0021290960 0.0068226413 -0.0057110264 -0.0068201555 -0.0113685355 -0.0057922400 -0.0034502538 0.0000318478 0.0019461802 0.0024989156 -0.0026044198 -0.0259620350 -0.0276870998 0.0197935365 -0.0123562714 0.0023409932 -0.0438884115 0.0119323200 0.0043046199 -0.0042476144 -0.0099910723 -0.0086927975 -0.0036937306 0.0024739642 0.0052571790 0.0040433361 -0.0001348350 0.0001000968 -0.0001924860 -0.0047517083 0.0074854125 0.0048534031 0.0075157773 -0.0066670175 -0.0092985947 0.0012545307 -0.0051962501 0.0043388342 0.0003611536 0.0017669753 0.0015967895 -0.0051270545 0.0011896903 0.0050205630 -0.0586894401 -0.0086459122 -0.0511173792 0.0754490780 0.0002032412 0.0391819848 0.0483158461 -0.0981536242 -0.0497204992 -0.0575180605 -0.0512097201 -0.0536425587 0.0075878667 0.1278177152 0.0356064712 -0.0475749117 0.0100391167 0.1428217684 -0.0485794978 0.0170313427 -0.0379752871 0.0078020363 0.0666631276 -0.0135361217 0.0280617483 -0.0214402494 -0.0054769857 0.0295789480 0.0061163478 -0.0263652724 0.0340292346 -0.0016834683 -0.0181803717 0.0167219857 -0.0266129741 -0.0386856120 -0.0018991491 0.0061953179 0.0250594444 0.0338799865 0.0069373318 -0.0181543739 -0.0446816571 -0.0107894325 0.0156731565 0.0039805268 0.0090713031 0.0154772905 0.0454557039 0.0134243948 -0.0140649518 -0.0428535114 -0.0147541755 0.0064354315 -0.0436863081 -0.0469764317 -0.0393022943 0.0702433996 -0.0171760798 -0.0875662836 0.0027493690 -0.0018749602 0.0008426354 -0.0597406968 -0.0500547231 -0.0467477752 0.0549903062 -0.0266220435 -0.0757086113 0.0452909997 -0.0219176709 0.0295562845 -0.0683736941 0.0354496964 -0.0275317689 0.0082836132 -0.0167760513 -0.0236245364 0.0679157193 -0.0394216140 0.0241078480 -0.0706577828 0.0434196895 -0.0130393688 -0.0269700017 0.0641732583 0.0665077426 0.1325377140 -0.0206568637 0.1426933988 0.0029548957 0.0005640484 -0.0014621096 -0.0481781397 0.0752434532 0.0844256284 0.1257364955 -0.0001364667 0.1429669070 0.0005591692 0.0003170825 -0.0015282237 -0.0037838161 -0.0010213588 -0.0032115813 0.0007596223 -0.0002967556 0.0019187976 -0.0048545018 0.0041196500 0.0060499549 -0.0216839580 -0.1134516827 -0.0023643169 0.0401919483 0.0750614912 -0.0148480047 -0.0098291044 0.0207766160 0.0074325604 0.0169560107 0.0312982331 -0.0069336203 -0.1252455952 0.0493551612 0.0786442111 -0.0283255285 -0.0216242680 0.0145999093 -0.0055588660 -0.0050071324 0.0036313318 -0.0027062717 -0.0394241303 -0.0015734921 -0.1473602086 0.0274228334 0.1021644707 -0.0304598751 0.0594302638 0.0224497448 0.0232177178 -0.2352526244 0.0221968283 0.0396543727 0.2855539912 0.0161031062 -0.0856437036 0.0095449207 -0.0523088766 0.0700346791 0.1089978093 0.0314414538 -0.1579352644 0.0154484158 -0.0936939367 -0.0624007234 -0.0913951490 -0.0233772026 -0.0975761030 -0.0059045848 -0.0532186308 0.0536133970 -0.1213379360 0.0385773750 -0.1854463002 0.0076089291 -0.1168288618 -0.0250471116 0.0940773908 -0.0209882483 -0.0039759519 -0.0002317765 0.0031022392 0.0058121980 -0.0137177808 0.0019624126 0.0272431503 -0.0039231487 -0.0169513291 -0.0065155889 0.0130742142 -0.0173685813 -0.0206590186 -0.0133341710 0.0057605493 0.0699233886 0.0247870677 0.0211723349 0.0587491678 0.0343488661 -0.0648881821 0.0541310875 0.0648755094 -0.0046098421 -0.0400716062 -0.1608536430 -0.0027188897 -0.4777270232 0.0626741478 0.2469635547 -0.0355697041 -0.0263618497 0.0132753757 0.0153673976 0.0183252270 0.0013772237 -0.0046203392 0.1522389649 0.0187843895 0.0246300001 0.0296408367 0.0111409072 -0.0097680192 0.0390170471 0.0103354275 -0.0041970788 -0.0232733860 -0.0017265507 0.0171299972 -0.0472777114 0.0046384733 0.1931464885 -0.0518050218 0.0936075388 -0.0110312017 -0.0055060778 -0.0060173283 0.0223442689 -0.0279157154 -0.0115719043 0.0019759248 -0.0025662853 0.0019073169 -0.0020300340 0.0035017812 0.0000544835 -0.0013701350 -0.0008711866 -0.0028903908 -0.0058323561 0.0058053240 0.0066937773 -0.0000311673 -0.0000001373 -0.0006793708 -0.0008120862 -0.0009701438 0.0000724882 -0.0010277356 -0.0007053177 0.0001325905 0.0008746984 0.0012706339 0.0006196907 0.0002560521 -0.0006507527 -0.0011237132 0.0003810677 0.0014483776 0.0009789610 0.0000051554 -0.0002432647 -0.0005692808 -0.0011778319 -0.0017937251 -0.0020366317 -0.0007079392 -0.0000050836 -0.0004061172 0.0011778866 -0.0025418797 0.0005489643 -0.0003658299 0.0003463656 0.0004495029 0.0018085606 -0.0008706359 -0.0026806187 -0.0028802221 0.0018487045 0.0066762402 0.0009675947 0.0007553365 0.0007579843 0.0011449875 0.0007648019 -0.0002658117 -0.0011882014 -0.0006569544 0.0005763399 -0.0002919826 -0.0000402571 0.0008041892 -0.0001654719 -0.0004667735 -0.0015740622 0.0003347565 0.0004489833 0.0009682821 0.0005023515 -0.0007204199 -0.0033509357 0.0002272422 -0.0006074472 0.0017251751 -0.0013711187 -0.0015071312 0.0027701631 -0.0032320944 -0.0032479693 -0.0051981715 -0.0053735148 -0.0038218351 0.0010079357 0.0001579330 -0.0000691511 0.0004816207 -0.0006547942 0.0033583673 -0.0026256196 -0.0111346936 0.0064536111 -0.0113053241 -0.0004346148 0.0002504440 0.0011661080 0.0005709849 0.0000799894 -0.0003597870 -0.0001717192 -0.0003942413 -0.0002301233 0.0001389194 0.0001745762 0.0001187265 0.0007464602 0.0006449514 0.0003255790 -0.0011910161 -0.0002923524 0.0007210365 -0.0006567704 0.0001031721 -0.0006356481 0.0000750111 0.0000030006 -0.0000241380 0.0002385304 -0.0001781012 -0.0003174496 -0.0072657574 -0.0101118689 -0.0036017790 -0.0072860528 0.0006755857 0.0060759727 0.0041916130 -0.0003456985 -0.0069688936 0.0078769680 0.0119077112 0.0009753080 -0.0030832323 -0.0055535667 -0.0011743199 0.0098631491 -0.0034053292 -0.0111144617 0.0047940694 -0.0030296748 0.0075893051 0.0002688764 -0.0046656166 -0.0022674610 0.0020591786 0.0060875237 0.0030481212 -0.0015975380 -0.0003220241 0.0021567166 -0.0017155897 0.0008724913 0.0009324005 -0.0013346161 0.0018502493 0.0021305915 0.0211098645 -0.0052240805 -0.0494088475 -0.0450372407 -0.0033845727 0.0344792038 0.0746641085 0.0126949436 -0.0355902410 -0.0168315794 -0.0185708732 -0.0242786772 -0.0776282262 -0.0174437313 0.0341916469 0.0853344394 0.0245802975 -0.0214915851 0.0411212701 0.0545193988 0.0613712198 -0.1580989505 0.0252691963 0.1689117347 -0.0029255812 0.0036516891 -0.0018339892 0.0637707603 0.0695300351 0.0819940697 -0.1377148529 0.0467854675 0.1660978644 0.0022080951 0.0025470503 0.0082141831 -0.0123424953 0.0035448159 -0.0104251991 0.0072048010 -0.0067322114 -0.0036208261 0.0126807230 -0.0042416752 0.0107745722 -0.0196046281 0.0096907112 -0.0081328614 0.0114343674 -0.0080543865 0.0058745996 0.0434946473 -0.0130151257 0.0355658983 -0.0016971525 0.0012795390 -0.0010044625 0.0113086818 -0.0013028015 0.0144115373 0.0476635285 -0.0071650685 0.0452984101 -0.0007064294 -0.0005310513 0.0021896394 0.0069822835 0.0019277011 0.0057766340 0.0005139662 -0.0000891319 0.0011973626 -0.0006603058 0.0005446462 0.0006922370 0.0543554598 0.3183726788 0.0123442579 -0.1029822336 -0.2471623669 0.0263304993 0.1401509285 -0.0379819553 -0.0816028982 -0.1219834947 -0.1167476435 0.0590203493 0.1073517683 -0.0220108516 -0.0803308762 0.0348962316 0.0852099227 -0.0130444102 0.1259320133 -0.0433555167 -0.0804809734 -0.0570237500 0.1629469996 0.0477570086 0.0650212747 -0.0342287519 -0.0308291375 0.0162012925 -0.1298150095 -0.0140305384 0.0006350031 -0.1141751350 0.0025853598 0.0211254547 0.1246936985 0.0100966338 -0.0884651572 -0.0048350386 -0.0520568160 0.0645036339 0.0609567453 0.0325565788 0.0748747035 -0.0271179472 0.0674987087 0.0011210838 -0.0420645633 0.0080399174 -0.0867809973 0.0204844689 -0.0488224989 0.0491753650 -0.0743380367 0.0326580739 0.0361768068 0.0144844818 0.0091989851 0.0122081751 0.0389748864 0.0041910054 -0.0001131308 -0.0001041541 -0.0008043939 0.0009795364 -0.0006241790 0.0011572393 -0.0008133863 0.0026237666 0.0025122052 0.0007237964 -0.0022545703 0.0030773333 0.0003312120 -0.0000687738 0.0000962617 0.0026066368 -0.0003733696 -0.0008459146 -0.0036781294 0.0019371551 0.0011790771 -0.0014282882 0.0006452653 -0.0046015263 -0.0008053530 0.0023248601 0.0005478137 0.0043237832 -0.0001757865 -0.0025357941 0.0019423365 0.0003484734 -0.0008265144 0.0014897659 0.0026935199 -0.0001775298 -0.0015243318 -0.0032728730 0.0004274268 -0.0014941320 0.0066786909 -0.0007539714 0.0039043891 -0.0025467788 0.0018936830 0.0030899482 -0.0026221508 0.0014787137 -0.0015128873 -0.0048806289 -0.0013137334 0.0132920394 -0.0040285799 0.0068516660 -0.0010490740 -0.0006243865 -0.0003312743 -0.0004303871 0.0006483535 -0.0001066289 0.0004145065 0.0001295140 0.0006071267 -0.0001619465 0.0001227877 0.0001464463 0.0008675237 0.0004738666 -0.0019756017 -0.0245918323 0.0242046477 0.0136352737 -0.0424790635 -0.0342496935 0.0237108655 0.0144089095 0.0115650347 -0.0077857089 0.0056896731 0.0141386528 0.0076892967 -0.0028046545 -0.0006750289 0.0029853348 -0.0037743747 -0.0039282508 0.0008551292 -0.0059515108 -0.0092793728 -0.0029367670 -0.0036920550 -0.0043009139 0.0082042530 -0.0140089502 -0.0252654366 -0.0123859846 -0.0135950089 0.0011716776 0.0245345721 0.0055724055 0.0195410743 0.0153879095 -0.0026964859 -0.0057801132 -0.0065132329 0.0076516522 -0.0007999052 -0.0017351017 0.0087219759 0.0025287721 -0.0072487268 -0.0020805009 0.0007879040 0.0026339101 -0.0045229927 -0.0027443902 0.0012881897 0.0016662215 0.0003557446 -0.0028137676 0.0010519903 0.0006370009 0.0010807419 0.0010706934 0.0005301633 -0.0017392486 0.0016739484 0.0013120219 0.0012055633 -0.0026542551 0.0003451382 0.0071225585 -0.0108408963 -0.0063126116 -0.0180178229 0.0009060724 -0.0024374532 0.0032126286 0.0025547443 0.0026990655 0.0028923172 0.0075860951 0.0053739791 -0.0009304089 0.0061244459 0.0071532691 -0.0083980220 -0.1029146067 -0.1150625294 0.0686133940 -0.0003199168 0.0014690055 0.0017408522 -0.0302957272 -0.0069589361 0.0127993854 0.0177514755 0.0142036931 0.0052543114 -0.0057687350 -0.0107200581 -0.0077412420 0.0027452539 -0.0021242235 -0.0003535718 0.0079731087 -0.0268742021 -0.0158176631 0.0007212448 -0.0177239552 0.0032032826 0.0206699095 0.0305113073 0.0012082887 0.0037733051 -0.0021379067 -0.0045583175 0.0093745849 -0.0004856892 -0.0078569109 0.2263985987 0.0959705814 0.1800018560 -0.1770188510 -0.0048819255 -0.1634174575 -0.1726890730 0.3013118960 0.1916240847 0.0032212448 0.1320647757 -0.1578460969 -0.0983985369 0.1639547357 0.0572271416 0.0906261767 -0.0421391337 0.0576741820 0.1363333371 0.0304844996 -0.1480393579 -0.0853474515 -0.2495230288 0.2456727797 -0.3315373770 -0.1757189738 -0.1268290362 -0.0709639601 -0.0171688021 0.0302892185 -0.0649067423 -0.0242433524 0.0328401221 -0.0398419203 0.0615565779 0.0933255594 0.0001633022 0.0003759164 0.0007944597 0.0012464134 0.0002769857 -0.0005107491 -0.0013609814 -0.0004195087 0.0003779749 0.0000354350 0.0002747813 0.0005870610 0.0015418516 0.0004710978 -0.0004432787 -0.0014549199 -0.0004975943 0.0002079256 -0.0026018622 -0.0018024692 -0.0016881911 0.0016451505 -0.0005719387 -0.0025444805 0.0003953558 0.0000292873 0.0000695239 -0.0022093826 -0.0017905124 -0.0015914251 0.0017211126 -0.0009915687 -0.0023825171 -0.0011828294 0.0004511517 -0.0008839194 0.0005273713 -0.0007689676 -0.0007672920 0.0016022898 -0.0000405750 0.0018648700 -0.0008340416 0.0002580773 -0.0005696128 0.0007322939 -0.0009166646 -0.0002528242 0.0016178794 -0.0024425777 -0.0022555081 -0.0006430630 -0.0012494423 -0.0010137339 -0.0060255664 0.0043101160 0.0028524622 0.0007714851 -0.0013187281 -0.0013716323 -0.0013656337 0.0010984026 -0.0034312289 -0.0000329228 0.0000077321 0.0000722274 -0.0002994163 -0.0001032961 -0.0002743273 0.0013904653 -0.0001763751 0.0019135572 0.0031105423 -0.0035118078 -0.0047698665 -0.0013511164 -0.0061381006 -0.0000436937 0.0016456480 0.0037118704 -0.0004865475 -0.0008358399 0.0013479495 0.0005929281 0.0007959894 0.0012949077 -0.0003442764 -0.0049138020 0.0023819834 0.0031693185 -0.0001972230 0.0002195075 0.0001376284 -0.0000303709 0.0000465687 0.0000243519 -0.0000304025 -0.0022096117 -0.0001650713 -0.0075833692 0.0018311893 0.0054831489 -0.0017544708 0.0042234708 0.0013772232 0.0002020208 -0.0134556095 0.0006355750 0.0007891234 0.0159598897 0.0001893359 -0.0050545405 0.0009465744 -0.0031226127 0.0033751991 0.0048340731 0.0015547688 -0.0060574853 0.0010164572 -0.0035084720 -0.0005033853 -0.0010655420 0.0000333906 -0.0050052716 -0.0000303190 -0.0027493708 0.0032984136 -0.0064500306 0.0023000079 -0.0097398170 0.0007876210 -0.0061254111 -0.0012567862 0.0062939013 -0.0011572715 0.0089957829 -0.0014188311 -0.0099355436 -0.0191092954 0.0407224579 -0.0003718450 -0.0716088545 0.0167115932 0.0502242478 0.0267843089 -0.0298678378 0.0515204731 0.0523227173 0.0394220724 -0.0162642444 -0.2223133417 -0.1006016068 -0.0848526135 -0.1210126499 -0.1567155625 0.1886413875 -0.1084421235 -0.1510733334 0.0468938510 -0.0010334946 -0.0000118809 0.0004675616 0.0000131816 0.0011074132 -0.0000757401 0.0019598851 0.0006834431 -0.0008164152 0.0024428483 0.0024291269 -0.0009631333 -0.0020689309 -0.0011738329 0.0008418380 0.0000948615 0.0001000405 -0.0001914439 0.0005591190 -0.0024362315 0.0004427572 0.0010547699 -0.0019376240 0.0004393002 0.0002519436 0.0027380268 0.0007940394 -0.0046077948 -0.0014408221 -0.0019747421 -0.0009455478 -0.0003973350 0.0000325773 -0.0003418901 0.0004731206 -0.0002216657 0.0009748510 -0.0011037445 -0.0003255978 -0.0014479207 0.0016165705 0.0011716589 0.0008468951 0.0009729625 -0.0009134149 -0.0114896071 0.0103625930 0.0026336326 -0.0329475591 -0.0267670577 0.0177946297 0.0110153055 0.0085472577 -0.0063772184 0.0053415018 0.0114124110 0.0057199043 -0.0018776843 0.0000596588 0.0028366875 -0.0032005776 -0.0032481393 0.0008617376 -0.0045884362 -0.0067003255 -0.0015797732 -0.0025237927 -0.0026322707 0.0057774191 -0.0113815058 -0.0199638529 -0.0101143517 -0.0101115841 0.0001287070 0.0173041524 0.0023248003 0.0117976607 0.0100918046 -0.0006619653 -0.0051378720 -0.0060189341 0.0028147792 0.0004197172 0.0025376766 0.0089615404 0.0003660731 -0.0139510223 -0.0032280843 -0.0007459676 0.0014041374 -0.0053454607 -0.0032896787 0.0017760430 0.0033706198 0.0015180012 -0.0029042847 0.0007573221 0.0002959563 -0.0015218178 0.0011594450 0.0014070317 0.0019895835 0.0003616895 -0.0002063341 -0.0016274619 -0.0014727954 0.0011096160 0.0098144183 -0.0051714763 -0.0082930446 -0.0155113973 0.0037624716 -0.0003069126 -0.0000007174 0.0088586875 0.0091128416 0.0130787157 0.0177381017 0.0124580129 -0.0023260420 0.0041397340 0.0045860927 -0.0061019485 -0.0735354163 -0.0835657687 0.0498253099 -0.0005452169 -0.0009759725 -0.0017675311 -0.0227090578 -0.0064887586 0.0106081852 0.0142083716 0.0153229000 0.0080760485 -0.0045909806 -0.0103300727 -0.0084862122 -0.0020031293 0.0008329059 0.0005694702 0.0021337128 0.0322019894 0.0203266076 -0.0051543374 -0.0220688877 0.0150096436 -0.0187031767 0.0017071544 -0.0190607442 0.0019820728 -0.0027487262 -0.0036904104 0.0091931806 -0.0030064404 -0.0091442238 -0.2848454144 -0.1871965303 -0.2081203668 0.0780056691 0.0141748356 0.1910550414 0.2007507958 -0.2715747020 -0.2457243327 0.0747470240 0.2726779905 -0.1931305878 -0.1770171861 0.1127473171 0.0503406471 0.1917759984 -0.0767106562 -0.0751306759 0.1299520411 -0.0949193926 0.2567545572 0.0224658398 -0.1306035348 -0.0997082737 0.0890869370 0.2064736944 0.1072108882 -0.0545642820 -0.0108274140 0.0580342643 -0.0591950461 0.0148589842 0.0325210756 -0.0338701694 0.0525775421 0.0643363523 0.0002705617 -0.0000545567 -0.0004941157 -0.0002100097 0.0000591174 0.0003618637 0.0005523797 0.0000601401 -0.0002938640 -0.0001642837 -0.0002023359 -0.0002369056 -0.0004708141 -0.0000485291 0.0002992336 0.0005547845 0.0002093756 -0.0001151018 -0.0007000634 0.0002673617 0.0001247992 -0.0013777433 0.0000985826 0.0013349834 0.0000277535 0.0000407837 0.0000523691 0.0002887650 0.0003017457 0.0006183059 -0.0010309288 0.0001331096 0.0014284955 0.0042394835 -0.0029076793 0.0003135449 -0.0030516173 0.0023910411 -0.0000221862 0.0005927355 -0.0009756006 -0.0013294626 0.0034111102 -0.0023040470 0.0009172573 -0.0036983499 0.0024727721 -0.0006450507 -0.0081784339 0.0095388925 0.0057836724 0.0005684950 -0.0007812044 0.0060904938 -0.0040434946 0.0014433168 -0.0050292822 -0.0018051453 0.0051338076 0.0035474288 0.0056908297 0.0004200841 0.0069054954 -0.0000084885 -0.0000003824 -0.0000011120 0.0000183075 0.0000075011 0.0000107255 0.0023328079 -0.0003561453 0.0054435501 0.0008588819 -0.0003624702 -0.0006218285 -0.0014418570 -0.0043849568 0.0001943317 0.0007331577 0.0027289825 -0.0000863460 -0.0006607342 0.0009003288 0.0004558107 0.0006579387 0.0007623043 -0.0003106062 -0.0029388938 0.0014611954 0.0018882087 0.0001350534 0.0001792874 -0.0000737807 -0.0001672563 0.0000580424 0.0000960383 0.0000320333 -0.0012652686 -0.0001278663 -0.0038620852 0.0009852125 0.0026964378 -0.0008305506 0.0019436294 0.0006115933 -0.0004220110 -0.0003697834 -0.0002371568 -0.0001181735 0.0023694319 -0.0000932449 -0.0008473793 -0.0007605705 -0.0004605358 0.0009595082 0.0007090465 0.0004942848 0.0007812790 -0.0010422643 0.0004914409 -0.0006299236 -0.0019958160 -0.0001820825 -0.0019424969 -0.0001705460 -0.0010662835 0.0007071320 0.0000101895 0.0003988715 0.0034550721 -0.0006765829 0.0018172478 0.0019533372 -0.0030826394 0.0013106935 0.0048586163 -0.0051811083 -0.0131683831 -0.0217120770 0.0501217904 0.0235539490 -0.0576467164 0.0298037560 0.0544035327 0.0514677293 -0.0100564834 0.0584254789 0.0500133120 0.0355927731 -0.0103735584 -0.1808532043 -0.1072849435 -0.0944127816 -0.1560614150 -0.1251647420 0.1905812877 -0.1272489764 -0.1311747533 -0.0229970440 0.0002417856 0.0004307274 -0.0001058446 0.0002468416 -0.0003977198 -0.0002376541 -0.0002792512 -0.0002608750 0.0001021827 -0.0008805771 -0.0003057439 0.0003093396 0.0003559063 -0.0001361089 -0.0000179846 -0.0003831137 0.0006033183 0.0000064143 0.0016773824 0.0005877852 0.0007552921 -0.0004159423 -0.0008928947 -0.0003013581 0.0003640966 0.0005662802 0.0000102409 0.0012875433 -0.0012448590 0.0005894223 -0.0001099713 -0.0002900391 -0.0007472733 0.0001814193 -0.0003021511 -0.0002271808 -0.0003438410 0.0031596010 0.0028817641 0.0025643872 -0.0034605595 -0.0030360258 -0.0004147552 -0.0013222602 -0.0033048195 -0.0258151846 0.0244469807 0.0180779653 -0.0333157273 -0.0264283587 0.0193990365 0.0117795089 0.0098741354 -0.0057490430 0.0036798748 0.0114201113 0.0070522451 -0.0028186436 -0.0014754860 0.0021746980 -0.0027820795 -0.0032076463 0.0001065426 -0.0046521011 -0.0075064904 -0.0026010472 -0.0030995995 -0.0039005803 0.0056030011 -0.0106028834 -0.0177600306 -0.0079258313 -0.0112303364 0.0013485872 0.0210094499 0.0058407860 0.0181285757 0.0137797706 -0.0046570465 -0.0041809649 -0.0042096145 0.0097077125 -0.0014586958 -0.0040305907 0.0095779511 0.0025866760 -0.0067448250 0.0019102705 0.0028586957 0.0006496142 0.0016550179 0.0011339466 -0.0006863474 -0.0026110728 -0.0011223321 0.0021058131 0.0002066256 -0.0008743751 0.0018770102 -0.0006326323 -0.0011352927 -0.0024997285 0.0004346751 0.0008345669 0.0015459839 0.0012561557 -0.0020495833 -0.0040245678 -0.0091321364 0.0096341726 -0.0026008367 -0.0022791317 0.0003882678 -0.0018014104 -0.0046281579 -0.0064337309 -0.0084714386 -0.0100798655 -0.0071657893 0.0013628958 0.0053431111 0.0062690548 -0.0067491057 -0.0807960940 -0.0946080347 0.0567157028 0.0017905643 -0.0001854189 0.0020146473 -0.0348893287 -0.0126232773 0.0157113758 0.0269835900 0.0189414611 0.0035044014 -0.0061350515 -0.0123488213 -0.0089453777 -0.0010086469 -0.0006695250 0.0001638059 -0.0273292584 0.0008259242 0.0033361396 0.0049042142 0.0245035363 -0.0149169120 0.0059838735 -0.0244670186 0.0196195343 -0.0013174770 -0.0041664858 -0.0051654624 0.0136832083 -0.0062891555 -0.0202816409 0.0384245848 0.2112667209 -0.0292857285 0.3195577506 -0.0141493573 -0.0558676401 0.0099221542 -0.1928750591 0.0431466623 -0.0666711877 -0.2653786187 0.1982437543 0.1681409585 -0.1274960872 -0.0557246778 -0.1773473451 0.0749048829 0.0648046693 -0.2681386848 0.0856167613 -0.1617002302 0.0404528002 0.3491990243 -0.0742312594 0.1591437303 -0.0908608239 -0.0204489191 -0.0376677479 0.0005802911 0.1159189766 -0.1405770695 0.0494648025 0.0767173358 -0.0232455260 0.0390309595 0.1276130764 -0.0001603988 0.0000979246 0.0004609136 0.0004808919 0.0000405091 -0.0002443208 -0.0005341476 -0.0001495553 0.0002150936 0.0002441711 0.0001756846 0.0002337361 0.0008459763 0.0001870755 -0.0003216305 -0.0008826936 -0.0002709942 0.0002382431 -0.0012392534 -0.0007355597 -0.0008029846 0.0010392920 -0.0000373823 -0.0015068040 -0.0004922405 -0.0001055552 0.0002484640 -0.0007018495 -0.0004268528 -0.0009051856 0.0009903895 -0.0002519199 -0.0015574605 -0.0019491381 0.0011461548 -0.0001708311 0.0019557552 -0.0011928707 -0.0000786241 -0.0063975239 0.0038813107 -0.0002138337 -0.0015378807 0.0007884157 -0.0000875858 0.0008195783 -0.0012309446 -0.0008733000 0.0069847867 -0.0079680760 -0.0040365091 -0.0038815971 0.0007051585 -0.0061277030 0.0289898328 -0.0174799951 0.0047717298 -0.0005073347 0.0031038295 -0.0007568914 0.0044149049 -0.0018288252 0.0012439424 0.0001592429 -0.0000135363 -0.0004307840 0.0001538292 0.0000349669 0.0001695600 -0.0102254544 0.0016300017 -0.0198853844 -0.0118622588 0.0117741237 0.0159820886 0.0003660018 0.0006665532 -0.0000998199 0.0000311615 -0.0006104881 -0.0000805811 0.0000882890 0.0000394329 -0.0000472113 -0.0002728472 -0.0002561690 0.0001320724 0.0007431407 -0.0001011271 -0.0004945577 0.0005121631 0.0007717276 -0.0002532729 0.0003030139 0.0000112519 -0.0002169276 -0.0000433532 0.0000547864 0.0000305162 -0.0005695864 0.0002000555 0.0006600950 -0.0002761469 0.0008758899 0.0002216223 0.0001610190 -0.0027275857 0.0001880520 -0.0005452513 0.0020333899 -0.0002282562 -0.0023545426 0.0007319960 -0.0014958871 0.0005507139 0.0000868448 0.0003140622 0.0045255833 0.0001276624 0.0031743718 0.0033760028 0.0043858490 0.0016555080 -0.0008440634 0.0009959755 -0.0005276613 0.0014340060 -0.0021208684 0.0009442348 -0.0014860350 0.0012864896 -0.0009593305 -0.0011582157 0.0052954130 -0.0009781261 0.0103868521 0.0001227963 -0.0114021194 -0.0157455978 0.0405170984 0.0005252698 -0.0802735667 0.0195652398 0.0558971455 0.0260622868 -0.0396917535 0.0610279658 0.0645956671 0.0393945918 -0.0181415537 -0.2163761202 -0.0583273324 -0.0446930406 -0.1908133312 -0.0816373058 0.1877238029 -0.1860847215 -0.2258974018 0.0241517113 -0.0002792876 -0.0007092049 0.0001874589 -0.0022065199 0.0007426571 0.0013593655 0.0007878232 0.0000946103 -0.0004016168 0.0021202380 0.0000925054 -0.0007669128 -0.0014404753 0.0006219074 0.0006397831 0.0055361435 -0.0025522740 0.0025019174 -0.0050104288 0.0009877898 -0.0023315590 -0.0025226149 -0.0006252251 -0.0015013278 0.0019751601 0.0045651443 0.0027484019 -0.0082341899 -0.0002576724 -0.0034275941 -0.0019032396 -0.0011078021 -0.0002762589 -0.0000759033 -0.0000555630 -0.0002002789 0.0008350241 -0.0001067635 -0.0000770710 -0.0010199052 0.0002833151 0.0003240259 -0.0006762282 -0.0003009258 -0.0001896752 0.0039171037 -0.0057964465 -0.0009993939 0.0047989308 0.0038030619 -0.0027436591 -0.0013789157 -0.0011567156 0.0006926767 -0.0001949913 -0.0015105533 -0.0012318570 0.0002204816 -0.0001250999 -0.0005027679 0.0002966922 0.0006675211 0.0004846031 0.0004721351 0.0006336792 0.0000531660 0.0002685295 0.0007127136 -0.0005169786 0.0016560404 0.0028106193 0.0013866615 0.0017225602 -0.0001236869 -0.0031216236 -0.0005335536 -0.0020945172 -0.0016535717 0.0007586162 0.0006831758 0.0000926186 -0.0016721909 0.0001509894 0.0025635539 -0.0002839604 0.0015682084 -0.0047402965 -0.0010909389 -0.0011180201 -0.0007009526 -0.0001231062 -0.0003046287 -0.0002210120 0.0010277936 0.0005312115 0.0001060196 -0.0004976215 0.0003542171 -0.0007408830 0.0000671653 0.0003054919 0.0015844090 -0.0003440580 -0.0006639891 -0.0011867492 0.0000698208 0.0013368523 0.0006826673 0.0086291712 -0.0062042719 0.0053607705 0.0012071145 0.0017148159 -0.0025332084 0.0013927424 0.0027484587 0.0027508790 0.0038620021 0.0023877301 -0.0009640916 -0.0007894520 -0.0008403090 0.0009500890 0.0140498655 0.0122177986 -0.0079603872 -0.0000100601 -0.0045977915 -0.0080088289 0.0086781533 -0.0004246073 -0.0049023045 -0.0085689586 -0.0060483771 -0.0018778919 0.0024840760 0.0043846938 0.0026081569 -0.0013758450 0.0031237069 0.0053068860 -0.0296045774 0.0132037396 0.0089719237 -0.0151816531 -0.0021042690 0.0206669367 0.0313648817 0.0191254833 0.0134968055 0.0015566891 0.0021707793 0.0012004120 -0.0058506483 0.0050762575 0.0089411268 -0.0752059463 0.1463393691 -0.1159009019 0.3885016833 -0.0124762631 0.0408619060 0.0947735357 -0.3304508152 -0.0546679418 0.1451811821 0.2269212848 -0.0003552231 -0.1016192040 -0.1593379795 -0.0367160603 0.1722202988 -0.0554956247 -0.2791346461 -0.0059367444 0.0945708417 -0.3059277088 -0.0858324157 -0.0774636848 0.2750440275 -0.3276323394 -0.2839881332 -0.1742913337 0.0143817137 -0.0016285675 -0.0728532653 0.0462537556 -0.0524667827 -0.0278576223 0.0142476533 -0.0216046220 -0.0263613823 -0.0000277018 -0.0006612242 -0.0013097549 -0.0014448809 -0.0001567732 0.0008892510 0.0018159110 0.0005131128 -0.0005527356 -0.0001610212 -0.0005361799 -0.0009508787 -0.0019855563 -0.0004931254 0.0007779512 0.0020809915 0.0007498085 -0.0003773477 0.0021902226 0.0020554962 0.0019878993 -0.0029147735 0.0005127763 0.0039895145 -0.0006435261 -0.0000718012 -0.0000890504 0.0022692629 0.0020166105 0.0021780164 -0.0027246601 0.0010996814 0.0038766958 0.0085657154 -0.0042323464 0.0041999202 -0.0078608202 0.0055511916 -0.0010992178 -0.0052202413 -0.0001056182 -0.0076617668 0.0092253538 -0.0049149574 0.0042454105 -0.0093661094 0.0067909040 -0.0009385591 -0.0077369321 0.0129662912 0.0120303496 0.0053658016 -0.0009550931 0.0142541775 0.0229987463 -0.0149815357 -0.0003184598 -0.0109835516 0.0161573112 0.0144602466 0.0201330553 -0.0016322912 0.0244775606 0.0000763373 -0.0000121214 -0.0001525402 0.0004861963 0.0001738232 0.0004260050 -0.0068712532 0.0011419588 -0.0123768760 -0.0108186327 0.0111072895 0.0144915264 -0.0010480079 -0.0002377235 0.0005029721 0.0001198486 0.0006007569 -0.0000607185 0.0004305344 -0.0002811954 -0.0002679326 0.0002246890 -0.0000058282 -0.0001291505 -0.0014670338 0.0001349360 0.0008268301 -0.0009567338 -0.0015306544 0.0004285151 -0.0003533029 -0.0004933164 0.0001642168 -0.0002596264 0.0009157729 0.0002289645 0.0007546574 -0.0007926832 -0.0006637971 0.0008097840 -0.0034062300 -0.0007666886 0.0000570380 0.0084819838 -0.0003612130 0.0006417770 -0.0074913380 0.0005054254 0.0009507730 -0.0020847726 0.0007157473 0.0002606104 -0.0010550474 0.0002347394 0.0073279646 -0.0029124669 0.0048660259 -0.0014122302 -0.0040630895 -0.0005478210 -0.0006087910 0.0001867336 -0.0003587092 -0.0006899798 0.0031490813 -0.0006011833 0.0122483357 -0.0012578603 0.0070030057 0.0034500302 -0.0079154750 0.0024865069 -0.0044720993 0.0011057120 0.0025769502 0.0187752033 -0.0235368688 0.0155955827 0.0407921520 0.0027627816 -0.0185725702 -0.0120461557 0.0087818824 -0.0185716305 -0.0105921744 -0.0142241719 0.0042353622 0.0785345065 0.0613914593 0.0551285766 0.0025398627 0.1027681632 -0.0683413917 -0.0101193567 0.0033501739 -0.0261485974 -0.0003617900 -0.0008712285 0.0004844210 -0.0029128147 0.0007225382 0.0020015147 0.0002697044 0.0001080383 -0.0001561719 0.0030225838 0.0001125899 -0.0002019555 -0.0004753489 0.0006577322 -0.0000809537 0.0184038897 -0.0043008078 0.0081332081 -0.0197202630 0.0020877945 -0.0096381954 -0.0061680231 0.0032644639 -0.0033668034 0.0018872553 0.0039805528 0.0067475385 -0.0086856760 0.0031683291 -0.0012857827 -0.0036074463 -0.0020150517 -0.0017558862 -0.0002805766 0.0005201625 -0.0001069844 -0.0008865872 -0.0009764778 0.0001157887 0.0003601173 0.0002445156 -0.0000994245 0.0011518172 0.0011397327 0.0005210175 0.0059366511 -0.0065996257 -0.0081162745 -0.0053409461 -0.0045451862 0.0024264619 0.0017176671 0.0010911717 -0.0013348960 0.0015529266 0.0017826578 0.0005612459 -0.0001679712 0.0004153739 0.0007654120 -0.0007200757 -0.0005305221 0.0005008362 -0.0007840022 -0.0008245682 0.0000588432 0.0000513763 -0.0000832475 0.0007846174 -0.0020104758 -0.0036561229 -0.0019032430 -0.0012773455 -0.0004169099 0.0014834098 -0.0004568242 -0.0001212434 0.0007061294 0.0010803647 -0.0011116517 -0.0013568346 -0.0023155238 0.0009598877 0.0028664554 0.0028207912 -0.0037986483 -0.0045226003 -0.0017060870 -0.0008579994 0.0006012162 -0.0027135530 -0.0016176676 0.0013779683 0.0022484914 0.0013855270 -0.0005866117 0.0001773411 -0.0006260977 -0.0026386716 0.0007752239 0.0011843925 0.0026842493 -0.0008662691 -0.0014500500 -0.0033212864 -0.0003505396 0.0013034994 0.0064688516 -0.0006585414 0.0004451952 -0.0037123978 0.0034080079 0.0016014555 -0.0024236770 0.0077162794 0.0085197079 0.0119907621 0.0129772505 0.0091573163 -0.0013432894 0.0002639023 0.0001884795 -0.0008582946 -0.0122028931 -0.0109524138 0.0069574409 -0.0041733324 -0.0146996620 -0.0329789633 -0.0001907406 0.0023036920 0.0001712315 0.0048961313 0.0084501400 0.0070251874 -0.0028694598 -0.0049027651 -0.0055240951 0.0038219838 -0.0010598497 0.0039322731 0.0341527014 0.0116260339 0.0033969964 -0.0045912902 -0.0047993579 0.0067158891 0.0183198686 -0.0219087461 0.0310507819 -0.0031464208 -0.0006883879 -0.0011484756 0.0013657981 0.0011949464 -0.0071065818 -0.1546657784 -0.3479869018 -0.0335372249 -0.3907846995 0.0253555728 0.1423001953 0.0612358868 0.1554340970 -0.1536980989 0.0423165607 0.1077080075 -0.0492064947 -0.0593289953 0.0048299233 0.0068769078 0.0854921260 -0.0310067388 -0.0595854045 -0.3273278609 0.1498837499 -0.3538629458 0.0111802735 0.4050385163 0.0259879558 0.0624933279 -0.2526360522 -0.1096930308 0.0357055020 0.0139696833 0.0144741652 -0.0652145435 -0.0021835069 0.0325905856 0.0293031165 -0.0380422834 0.0560948088 0.0001020939 -0.0019487483 -0.0035250281 -0.0039271370 -0.0006822144 0.0020349754 0.0043724034 0.0014498346 -0.0008796915 -0.0004540750 -0.0014446472 -0.0025147260 -0.0043372809 -0.0011168418 0.0015995012 0.0041424758 0.0018454491 -0.0001969671 0.0061772115 0.0058203911 0.0048717305 -0.0055709997 0.0018670184 0.0084660323 0.0007471538 0.0004812336 -0.0004622179 0.0060680486 0.0051668057 0.0048695488 -0.0055002162 0.0023012566 0.0087017843 0.0334147566 -0.0169404807 0.0159398328 -0.0351441093 0.0235547963 -0.0041234351 0.0067937970 -0.0155199446 -0.0229608446 0.0336438176 -0.0194377576 0.0113110832 -0.0310685583 0.0248477258 0.0019139614 -0.0440249222 0.0637838404 0.0531477772 0.0499091132 -0.0003662992 0.0725740201 -0.0346681970 0.0216683385 -0.0106096434 -0.0358070945 0.0467251780 0.0464710905 0.0456488438 0.0042765133 0.0688968195 -0.0004180999 -0.0000513187 0.0010020350 -0.0000570808 -0.0000733163 -0.0001208383 0.0149625754 -0.0027114561 0.0289185611 0.0117478614 -0.0116690161 -0.0155083925 -0.0013946551 0.0012309010 0.0008061608 -0.0005362455 -0.0005024133 0.0000150390 0.0027657780 -0.0009330013 -0.0016250539 -0.0005814157 0.0000381753 0.0003404298 -0.0062907354 0.0012351594 0.0033889871 -0.0037782997 -0.0038229352 0.0018113090 0.0010611257 -0.0016003416 -0.0006978921 -0.0013538579 0.0024512338 0.0009955949 0.0009394302 -0.0016649250 -0.0015063145 0.0006340092 -0.0061178148 -0.0008731956 0.0003542513 0.0279456541 -0.0008977048 0.0051906103 -0.0233555659 0.0027355293 0.0095865409 -0.0071092552 0.0063368662 -0.0008867573 -0.0017732663 -0.0003934814 0.0000649255 -0.0070000718 -0.0005443844 -0.0154461197 -0.0249099535 -0.0071154131 0.0018294830 -0.0030313522 0.0011697652 -0.0067948263 0.0133948895 -0.0047168236 0.0289316465 -0.0068898826 0.0170073096 0.0098285064 -0.0328574647 0.0077202847 0.0025079991 -0.0036674609 -0.0011476768 -0.0285512500 0.0349762509 -0.0096555714 -0.0313759990 -0.0094610718 0.0088127109 0.0245352276 0.0150424106 0.0070188644 -0.0020208684 0.0073935844 0.0028019468 -0.0203593005 -0.0741069108 -0.0722612833 0.0162006270 -0.0929362372 0.0493611157 0.0403489402 0.0604483498 -0.0235482766 0.0034713337 -0.0181206295 -0.0231395401 -0.0268717578 0.0001010923 0.0018066774 -0.0272126945 -0.0012469166 0.0148946277 -0.0775762810 0.0119880448 0.0351925392 0.0728526423 -0.0096276759 -0.0314044658 -0.0384108205 0.0026132024 -0.0160312434 0.0477708273 -0.0046754801 0.0189396745 0.0134034613 -0.0054624548 0.0078423601 -0.0020198804 -0.0045168698 -0.0137645755 0.0030040133 -0.0030508008 -0.0066270024 0.0065444945 0.0038961593 0.0039843241 -0.0110626064 0.0122871226 0.0065870664 -0.0006369679 0.0025373683 -0.0023259308 0.0009541041 -0.0021164007 0.0003413146 0.0001610134 -0.0003111286 0.0017463023 0.0198579283 -0.0167826987 -0.0262345015 0.0001895572 -0.0002349849 -0.0000494722 0.0006101533 0.0004855590 -0.0005048761 0.0024297099 0.0010421974 -0.0006078191 -0.0006729509 -0.0007758755 -0.0002830212 -0.0006363899 0.0008544766 0.0019766456 -0.0003808641 -0.0015660564 -0.0006565881 0.0007683000 0.0013351466 0.0004176393 0.0010272708 0.0015973565 0.0017380438 0.0017340216 -0.0008377690 -0.0019007730 -0.0039346303 -0.0009502902 -0.0031648183 0.0031929981 -0.0008941363 -0.0011535582 -0.0071050943 0.0024954278 0.0076695738 0.0032248067 -0.0033099483 -0.0142918870 -0.0026148586 -0.0022797129 -0.0015287047 -0.0025878153 -0.0016285177 0.0011131009 0.0031879849 0.0021631552 0.0001441258 0.0002694690 -0.0005067453 -0.0041471513 0.0005479101 0.0016179919 0.0054072730 -0.0018386844 -0.0024812179 -0.0051085644 0.0000670271 0.0028831697 0.0075691334 0.0055344684 0.0025601619 0.0027525302 0.0056661571 0.0041990996 -0.0087666247 0.0106590082 0.0111942291 0.0167766222 0.0164621070 0.0115821878 -0.0023903905 -0.0007873300 -0.0008759328 0.0000188986 0.0013258522 0.0011747749 -0.0002478500 0.0047334275 0.0364134233 0.0750296206 0.0017336984 0.0004632274 -0.0019791176 0.0009357326 0.0035731294 0.0037542420 -0.0008494654 -0.0015657391 -0.0021990261 0.0011360492 0.0001492989 0.0025303599 0.0109347083 0.0088349611 0.0034225894 -0.0054430240 -0.0014155587 0.0088787528 0.0096397119 -0.0069750017 0.0129740268 -0.0014733544 -0.0001654242 -0.0002495100 -0.0000580822 0.0013853992 -0.0017731506 -0.0934493550 -0.1435063185 -0.0414743462 -0.1115041246 0.0099739761 0.0807100361 0.0506836927 0.0057721512 -0.0872020522 0.0528346903 0.0972014530 -0.0161674379 -0.0496581722 -0.0487946306 -0.0094067428 0.0747920840 -0.0248128223 -0.1045386002 -0.1277350548 0.0657844959 -0.1621075281 -0.0030639360 0.1512587837 0.0333632269 -0.0027638960 -0.1210879624 -0.0568611241 0.0164367143 0.0053806094 -0.0052015640 -0.0208960719 -0.0098592515 0.0096279006 0.0146582323 -0.0190311702 0.0198376407 0.0056872742 0.0664243249 0.1111943847 0.1221679883 0.0199299134 -0.0656099400 -0.1347878653 -0.0465652927 0.0241656531 0.0065275312 0.0464538019 0.0865017510 0.1326826370 0.0336085134 -0.0497852136 -0.1275116710 -0.0581310212 0.0035181778 -0.1875846485 -0.1810180731 -0.1532252640 0.1670165037 -0.0611364497 -0.2593171443 0.0122966858 -0.0064235458 0.0050932608 -0.1997018172 -0.1650212535 -0.1548836368 0.1615737016 -0.0777139412 -0.2598763489 -0.0725477889 0.0351417903 -0.0390732837 0.0777610522 -0.0523076856 0.0103965827 0.0059408146 0.0237456519 0.0575142843 -0.0783025613 0.0450105214 -0.0272435291 0.0723662986 -0.0567892677 -0.0024905865 0.0809006863 -0.1268012495 -0.1141561304 -0.1091612924 0.0014217724 -0.1576755773 -0.0187657217 0.0077923606 -0.0000067600 0.0917616607 -0.1191881850 -0.1129923369 -0.1199626444 -0.0041587568 -0.1698866153 0.0040550347 0.0014732822 -0.0088942719 -0.0155198960 -0.0041517119 -0.0123013868 0.0014295856 0.0002523403 0.0033185482 0.0126214681 -0.0109208208 -0.0148405890 0.0473760016 0.0704729449 -0.0149784522 -0.0297005392 -0.0930857777 0.0060573983 0.0018809738 0.0094467792 0.0000133030 -0.0345321380 -0.0355903429 0.0164155584 0.1183757943 -0.0145271916 -0.0697668275 0.0759561377 0.1040867565 -0.0339383062 0.0354231072 0.0171521249 -0.0199413459 0.0033103167 0.0007377647 -0.0017947062 0.0168931064 0.0249591949 -0.0050669776 -0.0229702490 0.1117619386 0.0236383730 -0.0017665717 -0.0479731432 0.0017364084 -0.0172286327 0.0377194216 -0.0088746941 -0.0131898238 0.0175985488 -0.0096476569 -0.0060748662 -0.0053303175 -0.0029782307 0.0092946242 0.0170561349 0.0084811736 0.0407888480 0.0689706244 0.0181765204 0.0066454217 0.0063130153 0.0032889172 0.0109071253 -0.0224251173 0.0076174631 -0.0682743199 0.0160990990 -0.0389586361 -0.0244869591 0.0757208187 -0.0189173085 0.0006211660 -0.0013450268 0.0006551985 -0.0110287028 0.0130065883 -0.0031714825 -0.0074808672 -0.0065932717 -0.0013133581 0.0085293012 0.0103211615 -0.0027172613 -0.0026922983 0.0006361208 0.0018685156 0.0039636582 -0.0193666563 -0.0196012511 0.0077064415 -0.0208889575 0.0084679954 0.0148057501 0.0250668121 -0.0131336685 -0.0068484873 0.0175622916 0.0186314171 0.0312742492 -0.0024632441 -0.0095566026 0.0232028001 0.0005576918 -0.0122573449 0.0490405540 0.0014527700 -0.0274421837 -0.0585079510 0.0041741848 0.0268231468 -0.0724937755 0.0148781064 -0.0341262199 0.0621292016 -0.0204325720 0.0343839460 0.0287522102 -0.0101622954 0.0156019033 -0.0133829252 -0.0139728483 -0.0256011922 0.0259155451 -0.0077218291 0.0039754055 0.0189271253 0.0107274225 0.0073219810 0.0116013651 -0.0128148752 -0.0048926133 0.0034484331 -0.0004369284 -0.0005458295 -0.0037638483 0.0036144547 0.0023925977 -0.0039798334 -0.0032801887 -0.0017675927 0.0078390687 -0.0080474327 -0.0093029059 0.0060548943 0.0038533252 -0.0057132384 -0.0033151371 -0.0039020328 0.0000701718 -0.0000941419 -0.0025834719 -0.0026649199 0.0024245802 0.0029845314 0.0006277681 -0.0001180052 -0.0002429949 0.0001770022 0.0015699045 0.0039355142 0.0022864314 0.0002429675 0.0014410202 -0.0004574788 -0.0003433903 -0.0019069586 -0.0036754186 0.0030135669 -0.0022515633 -0.0097516141 -0.0031464772 -0.0116550417 -0.0059277685 0.0029419166 0.0002555197 -0.0003754407 -0.0046267394 0.0012842448 0.0043442350 0.0011216315 -0.0026256427 -0.0072163647 -0.0005645773 -0.0009600532 -0.0008399500 -0.0005438834 -0.0002484725 0.0009647017 0.0013686680 0.0009522349 0.0002625627 -0.0003909143 -0.0006030374 -0.0026382529 0.0004188265 0.0008546646 0.0025951719 -0.0016126944 -0.0019557170 -0.0032600626 0.0003739329 0.0005133758 0.0039867286 0.0060739044 0.0000107268 0.0056019815 0.0031866493 0.0013939257 -0.0027428478 0.0055800855 0.0070129233 0.0099807632 0.0083639221 0.0056507731 -0.0003743474 -0.0016068089 -0.0022344101 0.0023007718 0.0228847265 0.0267267037 -0.0189280479 0.0081396287 0.0507426773 0.1072543072 0.0015006197 0.0005885468 -0.0008030425 0.0028596978 0.0041674213 0.0029907170 -0.0011213983 -0.0020374121 -0.0025530363 0.0012118322 -0.0008459266 0.0033924165 0.0114621292 0.0071559710 0.0015378735 -0.0081990079 -0.0032907127 0.0129244522 0.0089631206 -0.0132993012 0.0165608081 -0.0024644493 -0.0004477662 -0.0002918027 0.0010126817 0.0005474415 -0.0044069654 -0.0743829550 -0.1376599917 -0.0252573897 -0.1242730619 0.0097615032 0.0702110951 0.0364034240 0.0273065704 -0.0699182360 0.0784124751 0.1527799285 -0.0331552647 -0.0795509012 -0.0594037402 -0.0097322720 0.1180206973 -0.0400178045 -0.1481485847 -0.1892760796 0.0811404469 -0.1857173231 0.0097675453 0.2371093835 0.0030502700 0.0526941836 -0.1305404397 -0.0546331537 0.0206891096 0.0080072545 0.0090749894 -0.0377422673 -0.0005730387 0.0187343623 0.0171480279 -0.0220293931 0.0317709288 -0.0026859354 -0.0431527964 -0.0732837669 -0.0789038550 -0.0123972654 0.0431461557 0.0876727928 0.0301227832 -0.0160451115 -0.0052230173 -0.0308539726 -0.0568147820 -0.0861321373 -0.0213654622 0.0331794035 0.0837749681 0.0378578625 -0.0026819819 0.1193039598 0.1168210341 0.0992853505 -0.1109983931 0.0397100395 0.1703090743 -0.0066921282 0.0045582668 -0.0037180835 0.1276403809 0.1067022212 0.1009924236 -0.1069318383 0.0516656158 0.1701722169 -0.1015517903 0.0483781210 -0.0560217742 0.1097538934 -0.0735515183 0.0151816546 0.0067216999 0.0350769925 0.0820244007 -0.1098387170 0.0624191621 -0.0397454753 0.1030454428 -0.0804129669 -0.0029434822 0.1099836645 -0.1759795117 -0.1599527466 -0.1581756991 0.0031671641 -0.2249105895 -0.0230450696 0.0089989985 0.0016014307 0.1252580223 -0.1653709828 -0.1588395554 -0.1725394643 -0.0064642810 -0.2412968852 -0.0029961285 -0.0009957551 0.0066203689 0.0096171315 0.0024991349 0.0075358924 0.0006473286 0.0006397015 0.0019124194 0.0166677707 -0.0143390570 -0.0195741554 -0.0296869989 -0.0670492427 0.0067342371 0.0232915780 0.0754467690 -0.0032733952 -0.0108413487 0.0005845632 0.0059628876 0.0252002964 0.0268509441 -0.0119281597 -0.0729001241 0.0132325843 0.0447577351 -0.0384058113 -0.0533488147 0.0171250689 -0.0247885758 -0.0063214583 0.0140864524 0.0019365860 -0.0152424615 -0.0024581802 -0.0398275272 -0.0044485023 0.0262590786 0.0067871696 -0.0380236599 -0.0076417910 -0.0030904220 -0.0951207658 0.0014894122 -0.0123173363 0.0868161369 -0.0072092019 -0.0244445446 0.0193191717 -0.0158935687 0.0049674862 0.0124289975 0.0018908494 -0.0412562507 0.0234379237 -0.0281007288 0.0289880971 0.0517712196 0.0130749780 -0.0088947676 0.0036338937 -0.0050113989 0.0181195913 -0.0390413188 0.0128364671 -0.0940968442 0.0149298242 -0.0554915016 -0.0253173124 0.0807925893 -0.0197250311 0.0006017377 -0.0005237352 0.0004236723 -0.0060632939 0.0059754096 -0.0050567980 -0.0060503551 -0.0042170018 -0.0001807009 0.0029453399 0.0031667838 -0.0007569223 -0.0041308006 -0.0019851528 0.0026557051 0.0223572083 -0.0077982953 -0.0100750627 0.0045481008 0.0008918773 -0.0032525987 0.0124331262 0.0271753001 -0.0228123375 0.0065217092 0.0036167180 -0.0013835618 0.0108779026 -0.0034090425 -0.0046453340 -0.0044901840 -0.0004184699 0.0018753055 -0.0030864803 -0.0142604787 -0.0004125052 0.0017835252 0.0002147791 -0.0009787287 0.0001319491 -0.0016750490 0.0005692919 0.0027676953 0.0143472237 0.0009441903 -0.0039444726 0.0019660422 -0.0015299211 0.0052587527 -0.0052010213 0.0008157107 0.0121017399 -0.0002274316 0.0045741575 0.0005914510 0.0004495779 -0.0007756095 -0.0000972671 -0.0002401137 0.0001442925 -0.0011928998 0.0028404909 0.0023767365 0.0031319746 -0.0034381851 -0.0030510824 -0.0008473389 -0.0015053598 -0.0015019457 0.0059235648 -0.0085296657 -0.0112379259 -0.0082300589 -0.0068434051 0.0040241630 0.0031139515 0.0021792682 -0.0021037306 0.0029910396 0.0027974084 0.0001670293 -0.0007520084 -0.0000516760 0.0010871743 -0.0010796747 -0.0004447084 0.0012419514 -0.0016239101 -0.0021712319 -0.0004099300 0.0000256676 0.0002011534 0.0008165564 -0.0027951868 -0.0042307359 -0.0016559176 -0.0020188089 -0.0001751202 0.0031354273 -0.0003414442 0.0017348261 0.0020216603 -0.0001311007 -0.0008142976 -0.0015786378 -0.0026544741 0.0002572972 0.0084810823 0.0101337789 -0.0007835608 -0.0273457076 0.0017074784 0.0006845753 -0.0037776682 0.0024340164 0.0018915033 -0.0000769193 -0.0003967877 0.0001478961 0.0018727861 0.0001997069 -0.0016678300 -0.0017738992 -0.0004682725 0.0002495555 0.0021441876 -0.0026516047 -0.0025789517 -0.0026897820 -0.0026185421 0.0012739132 0.0047257322 -0.0015817780 0.0188414613 0.0091180667 0.0026657914 0.0024301552 -0.0075244061 0.0014993487 0.0026925837 0.0054086437 -0.0017479598 -0.0021048130 0.0009600868 0.0003030464 0.0001543895 -0.0009224658 -0.0130365526 -0.0151196487 0.0089230055 -0.0006173482 0.0042527468 0.0059070557 0.0032364942 -0.0018381407 -0.0062226227 -0.0050256524 0.0046710942 0.0096461045 -0.0008747903 -0.0013885876 -0.0019803185 0.0032530915 0.0070381113 -0.0026407205 0.0170462625 0.0205230811 0.0129043780 0.0083538061 0.0263432639 -0.0227505667 0.0135550774 0.0252272205 -0.0037730133 0.0021918557 0.0007840690 0.0002193394 -0.0017824607 0.0054769067 0.0093233665 -0.2312590694 -0.2754910431 -0.1280533503 -0.1579708500 0.0177401867 0.1787983426 0.1394053218 -0.0584374612 -0.2187979491 -0.1115350610 -0.3809158662 0.2500854315 0.2475773938 -0.1128347105 -0.0561738502 -0.2753544122 0.1062281983 0.1439737635 0.1858719254 -0.0074554275 -0.0616036846 -0.0725135269 -0.2847417763 0.1995138363 -0.2989334723 -0.0867938818 -0.0756857341 -0.0289244395 -0.0155019851 -0.0765653647 0.0518344217 -0.0692355355 -0.0309043870 -0.0087984996 0.0146103063 -0.0209052754 -0.0016764586 -0.0033949864 -0.0036873251 -0.0066526667 -0.0021790667 0.0016085338 0.0049839044 0.0026368549 0.0007564686 0.0006540031 -0.0015210076 -0.0035723980 -0.0048325780 -0.0019730990 0.0004112730 0.0027354089 0.0023597256 0.0017400592 0.0142087588 0.0108897403 0.0070675204 0.0000327655 0.0028333290 0.0064724705 0.0025610282 0.0010046612 -0.0009937367 0.0123493044 0.0083587049 0.0051970229 0.0004818764 0.0027923565 0.0044622826 -0.0071431502 0.0041834345 -0.0021746222 0.0055489211 -0.0044399433 -0.0003783820 0.0026755428 0.0004814095 0.0054972291 -0.0068023398 0.0043771911 -0.0012539311 0.0042552821 -0.0043674154 -0.0018112165 0.0106454393 -0.0145628519 -0.0102014495 0.0002275008 -0.0007079587 -0.0090878597 -0.0050586638 0.0027732280 -0.0048868700 0.0139958090 -0.0141292372 -0.0111502453 -0.0046935932 -0.0022038238 -0.0101766216 -0.0010682363 -0.0000887359 0.0025085051 -0.0010567363 -0.0004819284 -0.0010450804 0.0020158999 -0.0004218213 0.0046056124 0.0020792216 -0.0016856243 -0.0017467916 -0.0005250514 0.0034110498 0.0006385890 0.0038769561 0.0044982593 -0.0015401451 -0.0048915534 -0.0040745495 0.0023059742 0.0065764164 0.0037509046 -0.0033938892 0.0056707917 -0.0077254453 -0.0036426584 -0.0071326702 -0.0146455203 0.0026441193 -0.0099291634 0.0004750664 0.0060268632 0.0024060691 0.0007917453 -0.0013528874 0.0225225464 -0.0079248192 -0.0159000419 0.0081960411 -0.0209878875 -0.0069194918 0.0022337717 -0.0059666091 0.0014743264 -0.0022839717 -0.0028813925 -0.0011307562 -0.0097649933 0.0032606225 -0.0061105806 0.0015598347 -0.0021120865 0.0010774756 0.0252784780 0.0002533789 0.0169227759 0.0159170227 0.0194938517 0.0078441046 -0.0029185520 0.0057946044 -0.0019167362 0.0052939999 -0.0060015590 0.0033614307 0.0069525962 0.0059859701 0.0031743467 -0.0027985318 0.0184576590 -0.0027245406 -0.0019596853 -0.0042536860 -0.0009705092 -0.0134740066 0.0234746231 0.0195951354 0.0053071950 0.0026222293 0.0007505526 0.0292384358 0.0291508412 0.0001825285 0.0104467091 0.0098469923 0.0029575608 -0.0356539442 -0.0600354632 -0.0552261608 -0.0513227907 -0.0476331973 0.0663646935 -0.0342195295 -0.0067114216 -0.0505584906 0.0802910268 0.0182006181 -0.0304120945 0.0865630427 -0.0232041316 -0.0371679922 -0.0541447025 0.0013321374 0.0242415071 -0.0449599841 -0.1721368817 0.0002698462 0.0398983349 0.0056604892 -0.0205440227 0.0455138997 -0.0257760224 0.0258070164 0.0093390906 0.1838927724 -0.0004946090 -0.0573720351 0.0140358623 -0.0254334040 0.0760072179 -0.0378999918 0.0296904549 0.0941185942 -0.0099034416 0.0361415947 -0.0173114445 -0.0054375270 -0.0064085245 -0.0121336834 0.0089028070 0.0048622409 -0.0011192767 -0.0005515640 -0.0005100943 0.0009202120 -0.0008333975 -0.0004814735 0.0021289382 0.0021321141 0.0015762141 0.0033945118 -0.0032422675 -0.0029897332 -0.0034219326 -0.0026637370 0.0019662526 0.0014444197 0.0012396787 -0.0006864572 0.0008982315 0.0016453513 0.0009394848 -0.0004547295 -0.0003722945 0.0000939537 -0.0004930437 -0.0003793475 0.0002781577 -0.0005020815 -0.0008152082 -0.0002083104 -0.0002301899 -0.0003934404 0.0006983380 -0.0007991293 -0.0015255170 -0.0004134474 -0.0010083043 -0.0002125278 0.0014707238 -0.0009712624 0.0011125182 0.0000838328 0.0005500928 -0.0009101098 -0.0012366470 -0.0009940079 0.0008993288 0.0004666823 -0.0001216528 -0.0016659935 0.0020629521 -0.0020555206 -0.0012517160 0.0006335993 -0.0021475322 -0.0014116364 0.0006226691 0.0015140663 0.0008165972 -0.0005891507 0.0002264288 0.0001583094 -0.0012373587 0.0005226999 0.0007675241 0.0015210499 0.0002136780 -0.0001678531 -0.0012131944 0.0009806137 0.0011267272 0.0008757818 0.0015198318 -0.0030148393 -0.0024953805 0.0018015172 0.0004661692 -0.0001549925 0.0038521675 0.0040584087 0.0050958336 0.0084006079 0.0057961598 -0.0012276115 0.0003113280 0.0005567438 -0.0009193157 -0.0078927834 -0.0102014359 0.0066096387 -0.0163996149 0.0156795565 -0.0032274284 -0.0003441473 0.0008204776 0.0006296586 0.0007791639 -0.0006065858 -0.0013364682 0.0001517584 0.0001576559 0.0001479581 -0.0006804255 -0.0017593602 0.0008341996 -0.0015451540 -0.0039371961 -0.0026824210 -0.0022819412 -0.0076752942 0.0060921863 -0.0027341743 -0.0063916430 0.0014644789 -0.0005817598 -0.0001898557 -0.0001084844 0.0000167005 -0.0009255654 -0.0019268641 0.0427141291 0.0408240302 0.0266412588 0.0104908819 -0.0023617082 -0.0321907464 -0.0279814991 0.0235636969 0.0403154572 0.0298560614 0.1055332711 -0.0719530585 -0.0685766993 0.0361816116 0.0170740348 0.0762560620 -0.0296304514 -0.0351755349 -0.0509343187 0.0050047131 0.0069885424 0.0171688326 0.0757069536 -0.0460386163 0.0715263977 0.0148644114 0.0152920363 0.0104014202 0.0046413524 0.0151481364 -0.0120477480 0.0143337742 0.0070356734 0.0048115505 -0.0072874943 0.0045608704 -0.0201762344 -0.0103022442 0.0041963525 -0.0235221348 -0.0150256195 -0.0064350558 0.0026158883 0.0102652865 0.0163571061 0.0152743855 0.0031922905 -0.0060294825 -0.0030987337 -0.0094160086 -0.0152282459 -0.0191192393 0.0032202592 0.0199580609 0.0745645815 0.0460478824 0.0161625834 0.0626451961 0.0084389940 -0.0301910076 0.0069276064 0.0019025205 -0.0010983643 0.0649371968 0.0277415951 -0.0000000131 0.0696734857 -0.0014929793 -0.0521371264 -0.0212620135 0.0220217854 0.0093913130 0.0006988190 -0.0098668264 -0.0179529472 0.0161776888 -0.0087998831 0.0050727438 -0.0030372293 0.0107672370 0.0173281460 -0.0188025616 0.0028230069 -0.0199197090 0.0664034154 -0.0677297395 -0.0268092704 0.0569819480 -0.0287112554 0.0251416451 0.0040669674 -0.0024197789 0.0014910096 0.0615328745 -0.0478646403 -0.0074483212 0.0700044176 -0.0211047484 0.0480516871 -0.0030675394 -0.0000416693 0.0068640379 -0.0054489023 -0.0020556936 -0.0049335103 -0.0032084065 0.0005287415 -0.0059682312 -0.0032301665 0.0029190895 0.0038061887 -0.0007999168 0.0645986447 0.0079712800 0.0388080538 0.0256397058 -0.0178949748 -0.0687733078 -0.0489264673 0.0333803011 0.0776413122 0.0316659669 -0.0412434199 0.1315022235 -0.1106168540 -0.0811951427 -0.0567791129 -0.1539566175 0.0172335544 -0.1237121933 0.0132324331 0.0759280420 0.0339409164 0.0177619394 -0.0184931403 0.3241554350 -0.1009337764 -0.2263139048 0.1093116634 -0.2600906483 -0.0904037079 0.0241113656 -0.0336914248 0.0144302465 -0.0185583440 -0.0628354598 -0.0080585334 -0.1266813956 0.0249014956 -0.0780954393 0.0316388680 -0.0251881951 0.0203965271 0.3673923800 -0.0204858155 0.2470995879 0.1867375009 0.2031174062 0.0943941369 -0.0559897740 0.0718672983 -0.0347387592 0.0665355193 -0.0585944397 0.0411197055 0.1762528713 0.0623404717 0.0895667313 -0.0024232766 0.1623373384 -0.0111640925 0.0007657695 0.0004628535 0.0006745443 -0.0016976187 0.0001791426 -0.0060415986 -0.0042050968 -0.0039881210 -0.0013433868 -0.0036061438 -0.0020071887 -0.0020278029 -0.0036179825 -0.0013672463 -0.0006327508 0.0022791714 0.0048564029 0.0045231045 0.0219910359 -0.0055212751 -0.0115926882 0.0185037746 0.0107464837 0.0171801428 0.0009840269 -0.0027609156 -0.0013326177 -0.0045892616 0.0024285826 0.0018689101 0.0004333314 0.0011214838 0.0000359161 0.0007124401 -0.0035813875 -0.0008759239 0.0006109487 0.0013108911 -0.0004443128 -0.0006666506 -0.0005973785 -0.0004512472 0.0005573467 0.0026408479 0.0004168885 0.0001411731 0.0008440619 0.0002838134 0.0006203119 -0.0014143199 -0.0000388871 0.0017249045 0.0006980080 0.0003877792 -0.0002885898 0.0006820410 0.0011733080 -0.0010327436 0.0012345669 0.0002567534 0.0006596460 -0.0092311447 -0.0069416694 -0.0054043647 0.0086091133 0.0059444316 0.0062947359 0.0061895800 0.0079049293 -0.2200335062 0.1968361908 0.3025851481 0.1099297754 0.0967818691 -0.0462936679 -0.0410616291 -0.0248263629 0.0338647810 -0.0406137807 -0.0421469206 -0.0103021843 0.0040001396 -0.0080485263 -0.0156520155 0.0220657812 0.0117162190 -0.0221885276 0.0129443769 0.0140084181 -0.0018236378 0.0061807617 0.0033004095 -0.0203094519 0.0430911906 0.0827337804 0.0420576532 0.0184481495 0.0204537505 -0.0010157268 0.0255963978 0.0290008216 0.0075773898 -0.0520679943 0.0284297298 0.0463522464 0.0962091472 -0.0375307595 -0.1159252967 -0.0538825714 0.0470521589 0.2029589348 0.0425434463 0.0362218400 0.0240387638 0.0299984281 0.0163596602 -0.0188098108 -0.0398068794 -0.0292415150 -0.0109305612 -0.0060955353 0.0118872573 0.0642324278 -0.0103298441 -0.0255109928 -0.0728213560 0.0284024420 0.0388176615 0.0766653396 -0.0218664903 -0.0346670214 -0.0669537982 -0.0961747345 -0.1015843360 -0.1006827122 -0.0890543640 -0.0406484314 0.0969386510 -0.1394588663 -0.1535391669 -0.2206264606 -0.2257319783 -0.1495160551 0.0232108815 -0.0065675661 -0.0074855847 0.0136323490 0.2129386257 0.2265439135 -0.1249862300 -0.0012680698 0.0012221123 0.0001938243 -0.0150733378 0.0057475989 0.0336731339 0.0023882095 -0.0241091681 -0.0327908688 0.0019935621 0.0065390715 0.0082892087 0.0020641600 0.0030436534 0.0002194315 0.0043500572 0.0021622652 0.0010713121 0.0001259112 -0.0020976655 0.0014622590 0.0023947298 0.0011036391 0.0008357828 0.0060462612 0.0027274711 0.0001039223 -0.0054813149 -0.0086610747 -0.0008993143 -0.0353801256 -0.0648278967 -0.0114989370 -0.0525869350 0.0024113385 0.0399611735 0.0188678617 0.0105899079 -0.0368099344 -0.0003368846 0.0095126065 -0.0142972961 -0.0086140736 0.0063034719 0.0034435480 -0.0029337516 -0.0011808569 -0.0069649111 0.0130628592 0.0055372852 -0.0317478924 -0.0109962341 -0.0170617626 0.0312415074 -0.0395399630 -0.0250907446 -0.0156284035 0.0269026943 0.0138299751 0.0784644760 0.0125625278 0.1004915186 0.0012334833 -0.0122799080 0.0018942366 -0.0384794975 -0.0009761004 0.0015209672 0.0025850633 0.0039797574 0.0010667324 -0.0008521471 -0.0030516500 -0.0016423117 0.0000619669 0.0014820783 0.0013032071 0.0018119662 0.0045000955 0.0012143580 -0.0015746997 -0.0044780918 -0.0017531201 0.0006876046 -0.0101612583 -0.0073963222 -0.0044174842 0.0013017262 0.0028365234 -0.0083500879 -0.0051072794 -0.0011390073 0.0040082235 -0.0047326040 -0.0044303634 -0.0042940191 0.0044864881 -0.0028437621 -0.0070752476 -0.0005417972 0.0001210453 -0.0006031123 0.0002961020 -0.0004106662 0.0001192791 0.0055317685 -0.0028163340 0.0019415219 -0.0013190154 0.0007216077 -0.0006913884 0.0016511958 -0.0008963649 0.0007337709 -0.0017417957 0.0017855263 -0.0002980359 0.0012198831 0.0009239093 -0.0005243833 -0.0259208034 0.0151094188 -0.0038873464 0.0029801986 -0.0040192772 -0.0028500220 -0.0062223239 0.0006991194 -0.0051293550 0.0019420762 0.0000602553 -0.0049229897 0.0016603430 0.0005778590 0.0014986170 0.0087265763 -0.0014503226 0.0161599924 0.0106467578 -0.0100008661 -0.0133649447 -0.0001603406 0.0005678315 0.0000999888 0.0001697433 0.0008847564 0.0000636867 -0.0041118092 -0.0004697817 0.0022766753 0.0026314608 0.0001423991 -0.0014778379 0.0091330446 -0.0040483844 -0.0055591923 0.0023491892 -0.0008606312 -0.0015975816 -0.0044303742 0.0014955925 0.0028852564 0.0020136022 -0.0001798726 -0.0011968100 0.0125620165 -0.0026537819 -0.0090906528 0.0037279397 -0.0057499013 -0.0029218084 0.0002335002 -0.0008570713 0.0001544969 -0.0001024463 -0.0005816520 -0.0001177175 -0.0016171203 0.0003466449 -0.0009459286 0.0005059955 -0.0003473529 0.0003243073 0.0032725873 -0.0001296200 0.0018903206 0.0021094020 0.0018638603 0.0010378700 -0.0009590771 0.0007026019 -0.0005447032 0.0006684067 -0.0001927654 0.0003935491 0.0032864988 0.0004152556 0.0015819987 0.0006485355 0.0004180945 0.0002734693 -0.0062716855 0.0153073754 -0.0286107216 0.1503346219 -0.1933907381 -0.0007825728 0.0172544563 0.1772571022 0.1370420238 -0.0886582458 -0.2384093534 0.1695031992 0.0281329368 0.0001227301 -0.0039460936 0.0193526523 0.0446659047 0.0376356116 -0.1766661352 0.1203106767 0.0391179508 -0.1371035793 -0.1081203326 -0.0994809312 0.0002311259 0.0006647542 0.0000114963 0.0008200225 -0.0004869063 -0.0004697317 -0.0001735392 -0.0002483723 0.0000301829 -0.0004512352 -0.0002171537 0.0003058423 0.0004678732 -0.0001556726 -0.0003453202 0.0004211745 0.0005152945 0.0002287517 -0.0007233654 0.0002078122 -0.0004242158 -0.0006070578 0.0004681191 -0.0002594254 0.0001193078 -0.0012526533 -0.0003348243 0.0026481119 0.0001150939 0.0009768398 -0.0000237517 0.0001084307 0.0002615868 0.0000216976 0.0000886824 0.0002983158 -0.0004700146 -0.0024238244 -0.0022333195 -0.0011320283 0.0022143182 0.0017989275 0.0020443623 0.0012917344 0.0023544845 -0.0786653525 0.0751789308 0.0973059766 0.0365717856 0.0300880993 -0.0185860395 -0.0147219814 -0.0109271615 0.0093046042 -0.0119180291 -0.0147471781 -0.0072029639 0.0037286193 0.0006564327 -0.0041706206 0.0056802167 0.0039178699 -0.0051512954 0.0042917205 0.0061565588 0.0007281573 0.0027543287 0.0033481260 -0.0039686212 0.0115186840 0.0205570507 0.0068037900 0.0095232685 0.0031222678 -0.0099070003 0.0069572667 -0.0036017761 -0.0021455642 -0.0175945327 0.0101683255 0.0163970923 0.0319927415 -0.0130335595 -0.0353061047 -0.0155664276 0.0143963536 0.0652442074 0.0222774159 0.0175691973 0.0072242939 0.0137113097 0.0083314995 -0.0053543852 -0.0147716949 -0.0123791225 -0.0104195839 -0.0052792352 0.0020976397 0.0252144585 -0.0021748374 -0.0096611680 -0.0330759890 0.0081060742 0.0135142225 0.0321493671 -0.0222267119 -0.0155866870 -0.0016007422 -0.0470126626 -0.0370342651 -0.0410329484 -0.0410697659 -0.0171399149 0.0536382899 -0.0548823467 -0.0581360875 -0.0774566132 -0.0976804457 -0.0638389939 0.0136822232 -0.0033470358 -0.0039303037 0.0043162015 0.0615641495 0.0736971157 -0.0429390024 0.0004983749 0.0008486591 0.0017798276 0.0011925230 -0.0067528654 0.0105776653 0.0024194449 0.0018997927 -0.0011299231 -0.0001755856 -0.0014519395 -0.0015762413 -0.0008882772 0.0003576547 0.0008283744 -0.0036985487 -0.0010262515 0.0008158033 -0.0012158398 0.0007564082 0.0010491769 0.0000364965 -0.0000899720 -0.0003816429 -0.0028486759 -0.0003225755 0.0032758134 -0.0071818140 0.0026862842 0.0112664286 0.0064747151 0.0403446169 -0.0085944377 0.0485489036 -0.0027609618 -0.0129039048 0.0000499473 -0.0250500878 0.0074950310 0.0133742109 0.0130907406 0.0098993597 -0.0043057054 -0.0216033764 -0.0063681271 0.0110607992 -0.0027157203 -0.0250802031 -0.0014584865 -0.0006145007 0.0032840567 0.0009358423 0.0012453580 -0.0023831790 0.0035809335 0.0020588454 0.0010251984 0.0223385450 0.0013330184 -0.0575600076 0.0757077003 -0.0162940979 -0.0390477003 0.0139553069 -0.0238678858 -0.0775529382 -0.0006990827 -0.0001856013 0.0003018874 0.0002860978 0.0002094094 0.0002258463 -0.0000701875 -0.0000804844 -0.0001760421 0.0017279160 0.0003732273 -0.0004147153 0.0003036167 0.0001423823 0.0001198216 0.0000923204 -0.0001772096 -0.0004235332 -0.0018027702 -0.0012716858 -0.0000955380 -0.0005625637 0.0003865570 -0.0001012121 -0.0082305743 -0.0020508360 0.0015101158 -0.0003885675 0.0002039410 -0.0001055842 -0.0016715419 -0.0003575896 0.0012007147 -0.0019383153 0.0011103578 -0.0005861893 0.0018719335 -0.0012880963 0.0000685950 -0.0020166014 0.0018034737 0.0009721770 -0.0015137796 0.0008256241 -0.0003797848 0.0011322156 -0.0011929070 -0.0005878148 0.0035974579 -0.0042165386 -0.0031982004 -0.0024690233 -0.0003191284 -0.0036956393 0.0097859072 -0.0057326929 0.0015445602 0.0026857037 -0.0021457758 -0.0024267244 -0.0007950424 -0.0011459619 -0.0020709897 0.0021151344 0.0000425708 -0.0047059103 0.0039630688 0.0015031835 0.0035998673 -0.0034844601 0.0005564848 -0.0062649965 -0.0039156143 0.0036523641 0.0048823323 0.0002440186 0.0001717961 -0.0000985404 -0.0001676061 -0.0001895304 0.0000604443 0.0002016840 0.0000643999 -0.0001034716 -0.0002853549 -0.0001202001 0.0001518217 -0.0000855785 0.0001740965 0.0000176678 0.0001605036 0.0005205751 -0.0000895194 0.0002852036 -0.0000091587 -0.0001640598 -0.0000190007 -0.0000766875 0.0000055280 -0.0006829473 0.0002552739 0.0003466625 -0.0002734653 0.0008173131 0.0001947319 0.0003802644 -0.0000162928 0.0002117373 -0.0001783478 -0.0002659581 -0.0000771982 0.0008242053 0.0002643493 0.0004726262 -0.0005985351 0.0000061399 -0.0003460844 -0.0019512346 0.0006066380 -0.0012877155 -0.0004908260 0.0003507484 -0.0003841145 0.0011092106 -0.0000499731 0.0006141330 -0.0003301911 -0.0003295346 -0.0001633968 -0.0030649572 0.0003482278 -0.0016936636 -0.0012509545 0.0019555551 -0.0008839420 0.0108489605 -0.0421305929 0.0188229192 -0.3262866778 0.4534987240 0.0588911088 -0.1326650761 -0.2796454159 -0.1718285004 0.2758709698 0.4366781963 -0.2039144494 -0.0075755473 0.0164247218 -0.0115910845 -0.1214141233 -0.0749328578 -0.0662698977 0.1332630050 -0.2197308312 0.0476869577 0.1236292957 0.0492244837 0.1576582980 -0.0064942644 -0.0011152168 0.0022380788 -0.0098932620 0.0005362182 0.0042835014 0.0057521685 -0.0022507087 -0.0031592378 0.0047090191 0.0039933061 -0.0023760580 -0.0029193911 0.0047894942 0.0022528288 -0.0087812348 0.0003252453 -0.0038017503 0.0054159056 -0.0086024904 0.0031984340 0.0007772497 -0.0073124388 -0.0008617212 0.0015489598 0.0136714019 0.0014227212 -0.0210755684 -0.0055934317 -0.0101946816 0.0002063801 -0.0010148760 0.0017048041 0.0014009946 -0.0026663061 -0.0000891796 0.0017634285 0.0020111134 -0.0007247851 -0.0013745618 -0.0006896393 0.0009128915 -0.0019229076 -0.0026657810 -0.0005036144 -0.0241663771 0.0193890191 0.0329290830 0.0242270956 0.0197875414 -0.0123423644 -0.0088072908 -0.0065832030 0.0054097122 -0.0060411101 -0.0104087163 -0.0053394417 0.0015269190 -0.0004588130 -0.0030899714 0.0037916349 0.0037151941 -0.0010372427 0.0022381644 0.0026005163 -0.0010050875 0.0022123305 0.0029296022 -0.0025470180 0.0090379036 0.0146152930 0.0068028719 0.0065205616 0.0033198319 -0.0068947906 0.0065319345 0.0033932305 0.0011951189 -0.0067296898 0.0058784004 0.0085425648 0.0099128483 -0.0058618941 -0.0104244328 0.0010179189 0.0008006864 0.0064463785 0.0084599720 0.0062477966 0.0016686148 0.0058751041 0.0036624731 -0.0020574170 -0.0054345621 -0.0041370364 -0.0034109840 -0.0010414967 0.0015920833 0.0090274467 -0.0015193840 -0.0036003942 -0.0106161666 0.0021002394 0.0040550296 0.0104245709 -0.0061204850 -0.0092025150 0.0015190173 -0.0159186246 -0.0148821061 -0.0152148407 -0.0125078628 -0.0077973381 0.0155905640 -0.0184877067 -0.0206241767 -0.0257344796 -0.0340403090 -0.0224657046 0.0048059352 -0.0027182469 -0.0031514081 0.0036349681 0.0497227424 0.0543961957 -0.0329317357 0.0139557787 -0.0066750483 0.0090986897 0.0070274929 0.0079526076 -0.0078238003 -0.0007875976 0.0049071888 0.0069630935 -0.0008038357 -0.0001327001 -0.0027598157 0.0034833133 -0.0033851552 0.0026097433 0.0395628704 0.0055898101 -0.0028106390 -0.0063790369 -0.0111555215 -0.0024078936 0.0000506038 -0.0019877581 0.0012820572 -0.0053173980 -0.0006948220 0.0004200249 -0.0080843284 0.0023701771 -0.0002623223 -0.0962090826 -0.3393022786 0.0169050997 -0.4748085718 0.0273212242 0.0993452570 0.0114779861 0.2470904584 -0.0998920075 0.0206567838 0.0973068440 -0.0783518037 -0.0439595917 0.1083424086 0.0350872981 0.0922973720 -0.0371058626 0.0614809192 -0.0349681683 0.0128218086 -0.0260282158 0.0008045177 0.0458078213 -0.0022942353 0.0218630845 -0.0217468731 -0.0097614065 0.0971628532 0.0318616513 0.0027426925 -0.0149567080 0.0202446409 0.0078178368 0.0597432703 -0.0876383458 -0.0122949267 -0.0033871255 0.0011234968 0.0040329433 0.0066813863 0.0035915563 0.0012627819 -0.0035390434 -0.0019144314 -0.0022594857 0.0159431976 0.0048084647 -0.0024847131 0.0029053150 0.0022108344 0.0024845515 0.0024853645 -0.0023450967 -0.0061426956 -0.0252876033 -0.0152434697 -0.0066223311 -0.0040174612 -0.0058926959 -0.0000708855 -0.0856448061 -0.0220698539 0.0145172009 -0.0124771590 -0.0034859738 -0.0020195530 -0.0202923388 -0.0019069022 0.0123255495 -0.0101982001 0.0076099514 0.0016461337 0.0160569805 -0.0059305071 0.0060568079 -0.0804181625 0.0473585305 -0.0162640523 0.0032038808 -0.0027467805 0.0017186711 -0.0068142020 -0.0002202270 -0.0114756805 0.0380575267 -0.0387447485 -0.0197432934 -0.0310852822 -0.0069212151 -0.0236187974 0.3637813858 -0.2076817930 0.0490590545 -0.0036011348 0.0149362509 0.0054225070 0.0418285402 -0.0192363454 0.0310189565 0.0219651966 0.0005768703 -0.0484659634 0.0418647289 0.0157570423 0.0376739435 -0.1215997615 0.0197633216 -0.2165938933 -0.1475886994 0.1345671089 0.1807099531 0.0028573216 -0.0049537636 -0.0019649949 -0.0049306310 0.0013154263 0.0029540248 -0.0020569740 0.0048471090 0.0016183457 -0.0045963750 -0.0049416853 0.0021538741 0.0114701214 0.0025620072 -0.0059023020 0.0151486999 0.0200893506 -0.0066921326 0.0020080251 0.0025636892 -0.0011267791 0.0026702770 -0.0031810881 -0.0018603245 -0.0089781696 0.0062203065 0.0076585115 -0.0023170714 0.0185241826 0.0030272429 0.0041430826 -0.0034945863 0.0023311997 -0.0071004506 0.0041583338 -0.0030906067 -0.0030250438 0.0031960300 -0.0022046925 -0.0030174483 -0.0028089606 -0.0015138245 0.0129382145 0.0025885706 0.0092320401 0.0116239742 0.0203830807 0.0049744424 0.0003713335 0.0031619043 -0.0000345910 0.0050391592 -0.0063345232 0.0032384867 -0.0087706531 0.0048164058 -0.0049252066 -0.0047749877 0.0212711079 -0.0041322134 -0.0003870371 0.0095768845 -0.0081624789 0.0660239412 -0.1103921510 -0.0546885122 -0.0157599673 0.0903132251 0.0879290070 -0.0547238809 -0.1414861610 0.1039145858 -0.0132868264 0.0019167734 0.0111570540 0.0276163542 -0.0987948216 -0.0972696153 0.0419556679 -0.0905152869 0.0322860439 0.0711919512 0.1226864201 -0.0681523603 0.0044634228 0.0083289588 -0.0002068066 0.0169594281 -0.0066069017 -0.0083377115 -0.0050293579 -0.0017575249 0.0018603812 -0.0074192677 -0.0016347204 0.0042794876 0.0070977440 -0.0056354028 -0.0040164007 0.0077621609 0.0042094530 0.0039477341 -0.0069289329 0.0032218350 -0.0044115778 -0.0055419298 0.0024482401 -0.0024144964 0.0034550782 -0.0084462157 0.0004826923 0.0179088279 -0.0004896166 0.0078954542 -0.0016825741 -0.0012002593 -0.0010011501 -0.0011524617 0.0013865266 0.0012160084 -0.0017780892 0.0001433183 -0.0004187910 0.0011361734 -0.0007397244 -0.0003950973 0.0014626014 0.0010630212 0.0011203166 0.0338521563 -0.0277782087 -0.0451626220 -0.0046162420 -0.0041976551 0.0023560846 0.0029949419 0.0022091070 -0.0020858901 -0.0000475995 0.0019182552 0.0043467827 -0.0015210083 -0.0015253202 -0.0001710915 -0.0013015714 -0.0000792948 0.0025342697 -0.0002949147 -0.0008869170 -0.0015691432 0.0019132879 0.0006363940 0.0006253977 0.0001190654 -0.0003134986 0.0018512444 -0.0003550622 -0.0006609691 -0.0018689286 0.0045456416 0.0059511910 0.0039423666 0.0045028294 -0.0024377945 -0.0026117874 -0.0104330767 0.0051159489 0.0032584048 0.0085291551 -0.0314816950 0.0050926145 -0.0021962470 -0.0019996105 0.0015993321 -0.0025135297 -0.0012743250 0.0022339358 0.0025037123 0.0025834970 0.0001301169 -0.0000708052 -0.0015509364 -0.0046860989 0.0013113866 0.0019260204 0.0035307594 -0.0018872011 -0.0025171848 -0.0055969868 0.0059042958 -0.0034137755 0.0059344786 0.0020047153 0.0078614465 0.0038302877 0.0042269047 0.0026208272 -0.0020153288 0.0111495807 0.0097951150 0.0158204212 0.0146387019 0.0097191104 -0.0004483948 0.0005845971 0.0011521788 -0.0016690013 -0.0269566956 -0.0244702505 0.0152873684 -0.0007603574 0.0029024854 0.0020175975 0.0117681192 0.0149538319 -0.0005777932 0.0152157814 -0.0079060996 -0.0208791794 0.0016515188 0.0059561714 0.0055367570 -0.0006618977 0.0006322290 0.0006691006 -0.0057410090 -0.0004948068 0.0015112645 -0.0003208118 0.0020506903 0.0002663544 0.0016998834 -0.0007065227 0.0011831409 -0.0122074145 -0.0060593487 0.0121938640 -0.0014502119 -0.0195847245 0.0240416945 0.0031189843 0.0485956892 -0.0139350783 0.0714572184 -0.0039086301 -0.0088743523 0.0057586988 -0.0435167947 0.0028847980 0.0057845315 -0.0099572489 0.0235165727 0.0084103670 -0.0310227920 -0.0100375853 -0.0089277041 0.0042843033 -0.0223633776 -0.0113451679 0.0073667251 -0.0209567696 -0.0022449324 0.0136870937 0.0092202659 -0.0071501807 -0.0160921588 -0.0081248688 -0.1230423622 -0.0423735669 0.0469157067 0.2771240244 0.1761624258 -0.1182972625 -0.1151797626 0.1436007112 -0.3372938742 -0.0042607886 -0.0029756682 0.0001652024 -0.0016208417 -0.0001617735 0.0013987785 -0.0004937637 0.0015131353 0.0014011598 0.0189999463 0.0037845835 -0.0069702558 -0.0014146159 -0.0003539570 0.0012660683 0.0018873495 0.0001833632 -0.0017916935 -0.0041210227 -0.0004578194 0.0005769900 0.0059620939 -0.0026390401 -0.0006027245 -0.0826249932 -0.0209523908 0.0136495305 0.0042180183 0.0062694758 0.0021127452 -0.0116276221 -0.0007605236 0.0110790179 -0.0034206127 0.0025448543 -0.0001220744 0.0005372227 -0.0018367128 -0.0023330921 0.0063155528 -0.0025627289 0.0037565265 -0.0028126115 0.0023036849 0.0004156704 0.0007256429 -0.0015401451 -0.0013765364 0.0071361983 -0.0078413583 -0.0047343899 0.0051687781 -0.0022658489 -0.0001563276 -0.0198708221 0.0111797558 -0.0025940724 0.0082468039 -0.0083367239 -0.0045479061 0.0004040142 -0.0007313681 -0.0029662506 0.0206791971 0.0004913044 -0.0453626985 0.0402442647 0.0150396218 0.0360081435 0.0062560486 -0.0010216331 0.0111514937 0.0080469265 -0.0072498672 -0.0097213796 0.0019544940 0.0026367603 -0.0005383353 -0.0001497968 -0.0025770975 -0.0003599775 0.0046337900 -0.0007996188 -0.0026659878 -0.0025028985 0.0008093225 0.0015084878 -0.0093737564 0.0027639642 0.0052476601 -0.0049685118 -0.0015044496 0.0026705889 0.0043329354 -0.0012838334 -0.0027341520 -0.0019432071 -0.0003636443 0.0011199189 -0.0100754784 0.0022582858 0.0068598131 -0.0040292843 0.0061786737 0.0029411794 0.0029311171 0.0023105412 0.0016786852 -0.0012715253 -0.0037079196 -0.0006903884 0.0043222122 0.0010660543 0.0024744238 -0.0034778601 -0.0002081550 -0.0020012465 -0.0072683551 0.0025668528 -0.0048060501 -0.0023639929 0.0026448372 -0.0016339481 0.0060126094 0.0005026218 0.0032754286 -0.0014463238 -0.0019901669 -0.0006805879 -0.0138607744 0.0026001956 -0.0074393038 -0.0069883257 0.0119538854 -0.0047018369 0.0308301431 0.0075829323 -0.0215791260 -0.1240218895 0.0590836970 -0.3064121177 -0.4275584172 0.0662631544 0.2795826320 0.0659994801 -0.2479059951 0.3561995038 -0.0249813044 0.0023331599 0.0031604409 -0.0165271077 -0.0838022031 -0.0770477175 0.1350079343 -0.1574881266 0.0065697558 0.1404305775 0.1313121531 0.0581335262 -0.0000525558 -0.0080301036 -0.0009155061 -0.0062463146 0.0073472543 0.0038083680 -0.0001981968 0.0052676006 0.0014314713 0.0033669555 0.0094757269 -0.0002285506 -0.0052782092 -0.0016636260 0.0018342736 -0.0008042897 -0.0000661081 -0.0005113300 -0.0003007220 -0.0072950122 -0.0000004129 0.0023394570 -0.0004759272 0.0009982939 -0.0037597143 0.0018483902 -0.0016930968 -0.0030060097 0.0004172710 -0.0013279702 0.0003920681 0.0005856349 0.0001153419 0.0000018170 0.0012949414 -0.0006394670 0.0011716121 -0.0026175507 -0.0009640780 -0.0020154349 0.0029297629 0.0020216972 -0.0003582058 0.0009591481 0.0002824305 0.0046598229 -0.0151173329 -0.0030238008 0.0088603590 0.0068493341 -0.0037989802 -0.0047320045 -0.0031564426 0.0030158698 -0.0013331156 0.0008003911 0.0025960484 0.0012055086 0.0007264886 -0.0013452904 0.0013241709 -0.0000026304 -0.0025837047 0.0017156833 0.0018481326 0.0011753270 0.0015865685 0.0009212123 -0.0011657277 0.0045181211 0.0047476644 0.0022218104 0.0029040361 -0.0007544301 -0.0036417742 -0.0092597714 -0.0031544169 -0.0081086249 0.0002952004 -0.0006715854 -0.0006134235 -0.0013144694 0.0026659098 -0.0046155357 0.0086362489 -0.0260688543 0.0161716191 0.0040225911 0.0022948765 0.0003429275 0.0005817264 0.0005424896 0.0002017315 -0.0012240430 -0.0017484836 -0.0004997240 -0.0012396939 -0.0002152861 0.0015074427 -0.0002800620 -0.0005719154 -0.0029933410 0.0001733996 0.0009189592 0.0027465567 -0.0070259092 0.0071777142 -0.0009536595 -0.0063722637 -0.0060145111 -0.0057861363 -0.0021850605 -0.0029282882 0.0046627661 -0.0025002587 -0.0010822262 -0.0017341675 -0.0073760332 -0.0050063756 0.0018833262 -0.0015742658 -0.0011592361 0.0016411228 0.0150882864 0.0142162804 -0.0128133657 0.0015357344 -0.0001748433 0.0017729994 0.0162423854 0.0151713933 -0.0003060784 0.0077988322 -0.0132136275 -0.0239045752 0.0037216531 0.0092391926 0.0082537585 -0.0004398350 0.0009379886 0.0007330518 -0.0014937915 -0.0005515483 0.0007745760 -0.0015180958 -0.0001467098 -0.0004246931 0.0001546189 0.0028845116 -0.0018082363 -0.0152458328 -0.0013746963 0.0059214428 -0.0206478225 -0.0006471685 -0.0041478074 -0.0038384907 0.0149580133 -0.0102386522 0.0203868189 -0.0016113883 0.0016639354 0.0045698395 -0.0149351025 -0.0045137338 0.0099134759 0.0029990634 0.0152256237 0.0059498637 -0.0139223891 -0.0045579929 0.0017082231 -0.0007937813 -0.0120373265 0.0315071778 -0.0073864318 0.0073294162 -0.0066016925 -0.0429648916 0.0147066405 -0.0261169357 0.0012789873 -0.0028157685 0.2430606542 0.0830975869 0.0588099488 -0.0285134831 0.1110611333 0.0175694286 0.1322058171 -0.2018361270 -0.0536301881 0.0119645858 0.0006793602 -0.0096570813 -0.0076549923 -0.0042030278 -0.0022874467 0.0074853793 0.0008641068 0.0010076774 -0.0572794208 -0.0156647558 0.0125314481 -0.0040695012 -0.0024958614 -0.0038200769 -0.0036876495 0.0044864960 0.0116951360 0.0451762513 0.0255336233 0.0112252896 -0.0079639241 0.0151666964 0.0050195591 0.2693596078 0.0691464817 -0.0440914098 0.0135871463 -0.0033549358 0.0034603292 0.0450656395 0.0059747009 -0.0304420816 -0.0004448003 -0.0003613172 -0.0009932807 0.0024783751 -0.0006818473 0.0017498845 -0.0094410405 0.0059621243 -0.0010264661 -0.0003956158 -0.0005552314 -0.0013819739 0.0017640008 -0.0010484990 0.0004121210 0.0010702561 -0.0014733528 -0.0019866849 -0.0074926079 0.0013288112 -0.0059631671 0.0367113948 -0.0210316155 0.0051569529 -0.0028088524 0.0031024188 -0.0007082070 -0.0020337196 -0.0008502663 -0.0020078683 -0.0683117443 -0.0017654806 0.1491612410 -0.1311143793 -0.0491308754 -0.1173314878 -0.0123284387 0.0020241600 -0.0217720748 -0.0147129813 0.0134036498 0.0179195165 -0.0076346067 0.0001488898 0.0036065178 0.0052289124 -0.0009284972 -0.0030908190 0.0051538315 -0.0037314796 -0.0032028262 0.0037038681 0.0045081846 -0.0016834302 -0.0212549797 0.0021152553 0.0116527052 -0.0165415300 -0.0203959887 0.0075563032 0.0017888553 -0.0040745074 -0.0013737165 -0.0049471592 0.0045502991 0.0033284454 -0.0029344432 -0.0039752219 0.0010177152 -0.0001252319 -0.0180347356 -0.0013320976 -0.0022182298 0.0010058913 -0.0012438629 0.0014059167 0.0030415035 0.0007293998 0.0047710904 -0.0015446146 0.0030550590 -0.0002558946 0.0015442059 -0.0002735700 -0.0160008730 0.0001537733 -0.0111806409 -0.0082900916 -0.0104781937 -0.0040350604 0.0021026992 -0.0032343266 0.0013348687 -0.0031048287 0.0029804804 -0.0019414959 -0.0061554234 -0.0031692498 -0.0031064643 0.0007076735 -0.0091167546 0.0009201180 0.0308318077 0.0041267831 -0.0212201147 -0.1515260849 0.0935276246 -0.3068842531 -0.4443694331 0.0505463665 0.2747104760 0.0934374779 -0.2183900019 0.3539810810 -0.0277987171 0.0007693899 0.0051751959 -0.0025256900 -0.0908568394 -0.0846409715 0.1367161336 -0.1564894042 0.0044862692 0.1459918533 0.1464302478 0.0429952903 0.0027815247 0.0052488650 -0.0001671273 0.0102826250 -0.0041753041 -0.0050763687 -0.0029767571 -0.0012297301 0.0010382256 -0.0045219786 -0.0015348402 0.0025603591 0.0045541424 -0.0033001299 -0.0025137773 0.0051141634 0.0027371562 0.0025938086 -0.0045032496 0.0024144694 -0.0028227038 -0.0036747916 0.0015801960 -0.0015935587 0.0024248159 -0.0054861704 0.0004533161 0.0116269259 -0.0003519767 0.0051589659 -0.0012114836 -0.0008436489 -0.0006532697 -0.0007876003 0.0008462190 0.0007286996 -0.0010519375 0.0001741970 -0.0001663662 0.0007544601 -0.0006132742 -0.0003948084 0.0009476729 0.0005953303 0.0006685418 0.0084491941 -0.0040604564 -0.0099387941 -0.0016628423 -0.0014656630 0.0007424741 0.0010171176 0.0006989355 -0.0007523307 -0.0006956024 0.0002395130 0.0015308587 -0.0003675595 -0.0003608043 0.0000187016 -0.0004333639 -0.0001182897 0.0007178658 0.0000415953 0.0000219893 -0.0004683157 0.0003933971 -0.0000295573 0.0003176732 -0.0003485951 -0.0005458237 0.0000908208 -0.0003190165 -0.0001791344 -0.0004671914 0.0027675006 0.0020001588 0.0019702851 0.0018901796 -0.0009570628 -0.0008463814 -0.0025422824 0.0017110312 -0.0009809746 -0.0025959558 -0.0078585590 0.0128757275 -0.0026878796 -0.0019307881 0.0009994610 -0.0022885913 -0.0011853743 0.0013041462 0.0010503830 0.0010417577 0.0019688979 0.0009273055 -0.0000810257 -0.0024532792 0.0008219786 0.0011425612 0.0023316632 -0.0003595763 -0.0010636782 -0.0038654659 0.0034794859 0.0000534154 -0.0016617607 0.0029997516 0.0043295316 0.0022508115 0.0036281766 0.0021087005 -0.0041412986 0.0050517136 0.0047478852 0.0054978466 0.0114012454 0.0070592398 -0.0008532585 0.0004641750 0.0005783372 -0.0008246639 -0.0107972903 -0.0088721146 0.0065385252 -0.0006948747 0.0017508322 0.0008331199 0.0091099490 0.0043821774 0.0001473853 -0.0083022878 -0.0129160363 -0.0118480823 0.0049699663 0.0088289108 0.0070908302 -0.0010690645 0.0011713814 -0.0002774803 -0.0036703431 -0.0003414871 0.0004821149 0.0009451041 0.0011718884 -0.0007002380 -0.0004915300 0.0075074312 -0.0041784028 -0.0083314295 0.0034633121 -0.0066795904 -0.0319240057 0.0153316389 -0.0355123474 0.0016947385 0.0305373589 -0.0093075464 0.0494448649 -0.0031424897 -0.0016000063 0.0039132851 -0.0323239774 0.0036029145 -0.0036436535 -0.0218445571 0.0179807784 0.0135638474 -0.0144987700 -0.0052123476 -0.0207877094 0.0073918839 -0.0021794050 0.0774745600 -0.0210931419 0.0329691091 -0.0116276623 -0.1074869153 0.0242414046 -0.0544314190 0.0149084798 0.0000064383 0.5376090858 0.1899951661 0.1127788469 -0.3527274183 0.0621586244 0.1666463975 0.3352431543 -0.4802646796 0.2550701430 -0.0032331332 -0.0017734474 0.0007108067 -0.0004610344 0.0001658469 0.0009395794 -0.0007394833 0.0008168966 0.0007584800 0.0144855925 0.0031498150 -0.0047845109 -0.0005325541 -0.0000453284 0.0008967913 0.0012245078 -0.0001693790 -0.0016925673 -0.0051092498 -0.0018774025 -0.0003180841 0.0038479182 -0.0023527751 -0.0006349482 -0.0641109622 -0.0162901015 0.0107797404 0.0016956266 0.0035792939 0.0010331876 -0.0091804404 -0.0008783018 0.0080421477 -0.0018481453 0.0014839245 0.0001160194 -0.0002403184 -0.0008902528 -0.0016893369 0.0056069971 -0.0026997073 0.0024489250 -0.0016034237 0.0014414341 0.0004011254 0.0002445717 -0.0007518551 -0.0007397720 0.0038977137 -0.0041540503 -0.0023370126 0.0045705735 -0.0014036174 0.0010178846 -0.0194167188 0.0109785931 -0.0026301919 0.0049880134 -0.0053433260 -0.0025018224 0.0001507704 -0.0001278020 -0.0017186809 0.0161501665 0.0004100491 -0.0353247647 0.0311767946 0.0116347141 0.0278085468 0.0062746230 -0.0010143263 0.0111242995 0.0078430587 -0.0070740822 -0.0094721988 0.0014338030 0.0015998653 -0.0004387617 -0.0002966043 -0.0014699165 -0.0000957255 0.0024330685 -0.0003618987 -0.0013966304 -0.0015497307 0.0003064946 0.0009145428 -0.0044380347 0.0014055531 0.0024693364 -0.0022575725 -0.0001539343 0.0012322591 0.0023660730 -0.0005652247 -0.0014804525 -0.0009084190 -0.0003762493 0.0005051435 -0.0054422077 0.0013980461 0.0037064795 -0.0022698999 0.0041338503 0.0016764061 0.0019419063 0.0014761490 0.0011069350 -0.0008009573 -0.0025180871 -0.0004470025 0.0024952685 0.0006863032 0.0014193813 -0.0021292405 -0.0001420028 -0.0012250261 -0.0038683603 0.0015436480 -0.0025333646 -0.0012226963 0.0019293868 -0.0009081296 0.0036360268 0.0004677722 0.0019715490 -0.0007760998 -0.0013801276 -0.0003449005 -0.0082465092 0.0017633502 -0.0044481522 -0.0043747070 0.0078011242 -0.0029742271 0.0079253113 -0.0003464977 -0.0054719050 -0.0563868453 0.0438368738 -0.0838183952 -0.1306291075 0.0033590803 0.0703059459 0.0407256881 -0.0423397531 0.0959482625 -0.0096812563 -0.0016069236 0.0010652108 0.0059855498 -0.0162148221 -0.0149459384 0.0400822811 -0.0350628913 -0.0074228670 0.0411027261 0.0389405848 0.0165890281 -0.0808054428 -0.0799104080 0.0168941244 -0.2351512141 0.0562646079 0.1092272087 0.0815745507 -0.0078398917 -0.0379505606 0.1020283097 -0.0328602191 -0.0683041791 -0.0893621095 0.1041524424 0.0550601534 -0.1158041860 -0.0715615690 -0.0588573416 0.1079386987 -0.0013557747 0.0687286260 0.0803718663 -0.0189194993 0.0363005625 -0.0561105309 0.1019065362 -0.0130067594 -0.2368946932 0.0232362167 -0.1040468702 0.0367189316 0.0241787984 0.0144624803 0.0267853501 -0.0344602033 -0.0132047600 0.0082866042 -0.0002325146 0.0008978975 -0.0065614083 0.0070967900 0.0042371607 -0.0085081611 -0.0077802460 -0.0062960484 0.0163848306 -0.0141513666 -0.0259493214 0.0011028054 -0.0008071079 -0.0035560342 -0.0014548941 -0.0027674012 -0.0016404216 0.0010583048 -0.0009908897 -0.0021356074 0.0022848085 0.0034538976 0.0013668688 -0.0013383197 -0.0002447559 0.0020493737 0.0014867519 0.0028128098 0.0014764333 -0.0006271177 0.0008289743 0.0010568495 -0.0025815529 -0.0060564408 -0.0058897214 0.0031922121 -0.0033967838 -0.0105216611 -0.0037837939 -0.0105441839 -0.0065293663 0.0057514213 -0.0008922534 -0.0014972615 -0.0089378847 0.0034168005 0.0081033752 0.0042020784 -0.0103522414 -0.0101154818 -0.0002008469 -0.0014703135 -0.0027244502 0.0011101672 0.0009217210 0.0007091340 0.0009015509 0.0007980482 0.0005782086 -0.0002150480 -0.0003423226 -0.0020475695 0.0004036239 0.0006215376 0.0014547386 -0.0023532371 -0.0022582891 -0.0028240360 -0.0004220254 0.0003361965 0.0047976145 0.0097566205 0.0065295617 0.0152113563 0.0028267406 0.0012286138 -0.0041037478 0.0033113566 0.0040659109 0.0074605306 0.0015988278 0.0013072301 0.0007564750 -0.0001885861 -0.0008811862 0.0016040166 0.0033522227 0.0085336236 -0.0100715598 -0.0008580035 -0.0306886808 -0.0284653168 0.0082480193 -0.0011795887 -0.0007667378 0.0048347899 -0.0019533083 -0.0065416571 0.0005053844 0.0024610650 0.0024733120 0.0003016903 -0.0001519449 -0.0004708922 -0.0004832512 -0.0006609645 -0.0007397195 0.0007460608 0.0019809131 -0.0021364532 -0.0005227467 0.0003105754 -0.0001036077 -0.0053174318 0.0001119495 0.0033659316 -0.0028075585 0.0033168846 0.0020645107 0.0090667406 0.0051697971 0.0075299776 0.0004671727 -0.0004596782 -0.0044169335 -0.0055058267 0.0050909282 0.0075588411 -0.0095932408 -0.0309836183 0.0213425694 0.0202515801 -0.0069677496 -0.0040169632 -0.0221741180 0.0081455374 0.0138868330 0.0056587678 -0.0020043703 0.0034072286 -0.0001681082 -0.0060979081 -0.0006125769 -0.0010895391 0.0026671780 0.0012519075 0.0238196484 0.0035598398 -0.0426413816 0.0091421926 -0.0363410313 -0.0090280603 0.0203303565 -0.0284475347 -0.0003940188 0.0084465663 0.0330234796 0.0279489573 0.0553486569 0.0238470623 -0.0018671403 -0.0178336618 -0.0235323141 -0.0271605827 -0.0216766456 0.0094533776 0.0353156470 0.0333432738 0.0175740557 0.0056104270 -0.0013589792 -0.0190918536 -0.0272168983 -0.1502666786 -0.0988511898 -0.0537895317 -0.0677726846 -0.0216297553 0.0018712348 -0.0134696960 -0.0056819431 0.0049375568 -0.1191041176 -0.0684926730 -0.0354134390 -0.0546832872 -0.0087487793 0.0007229903 0.0476926857 -0.0378808583 -0.0040974969 -0.0095234741 0.0238178447 0.0308919716 -0.0264887239 0.0017923463 -0.0339713259 0.0293614149 -0.0263858526 -0.0103526525 0.0042468864 0.0156943159 0.0295222850 -0.1243023747 0.1290334119 0.0700234047 -0.0620899792 0.0405460988 -0.0007956064 -0.0084250119 0.0055656968 -0.0040659554 -0.1016853960 0.0936245154 0.0464469821 -0.0568831175 0.0235907100 -0.0022583445 0.0073599743 0.0004739698 -0.0159525393 0.0066666097 0.0029180068 0.0064346788 0.0074572754 -0.0013995300 0.0132459599 0.0033357286 -0.0033589182 -0.0045521485 0.0186261277 -0.0433670637 -0.0159140445 -0.0297515518 0.0490234909 0.0253160866 -0.0998801963 0.0369525586 0.0592507724 0.0134934214 -0.0410633772 -0.0116036972 0.2627276837 -0.0492898101 -0.1463006102 0.1764094334 0.1494734357 -0.0867608969 -0.0772270440 0.0422160301 0.0502252096 0.0599657814 -0.0202824615 -0.0373208286 0.1682302936 -0.0123659507 -0.1096926841 0.0636290052 0.0119894855 -0.0376512743 -0.0489887324 -0.0377794054 -0.0286733143 0.0351511159 0.0380805838 0.0186982376 -0.0836630461 -0.0165731217 -0.0483731357 0.0656040097 0.0032457575 0.0377994946 0.1522907996 -0.0456383996 0.1019617845 0.0469012373 -0.0465582220 0.0322257729 -0.1062672623 -0.0042578292 -0.0580215749 0.0232159062 0.0349773604 0.0107106530 0.2604490965 -0.0422429999 0.1399439321 0.1203561953 -0.2077482300 0.0815266043 0.0122444596 -0.0032382902 -0.0036742717 -0.0986428815 0.0959065260 -0.1009884143 -0.1741527511 -0.0268467893 0.0672593052 0.0712226270 -0.0134108810 0.0948826345 -0.0023531629 -0.0067457732 0.0061282787 0.0654325186 0.0202914145 0.0153379393 -0.0413335201 0.0774650672 -0.0215044507 -0.0379473613 -0.0018252948 -0.0672872711 -0.0027412850 -0.0027371629 0.0006183082 -0.0077168834 0.0019156518 0.0035893319 0.0026735922 -0.0001966018 -0.0012202555 0.0034230774 -0.0007636357 -0.0022694394 -0.0032170766 0.0034639935 0.0019437885 -0.0041335354 -0.0025440451 -0.0020865267 0.0038515218 -0.0002981640 0.0024169582 0.0029044923 -0.0006811438 0.0012988244 -0.0021763563 0.0036761617 -0.0005715894 -0.0084801305 0.0008467537 -0.0037283294 0.0014051209 0.0008681671 0.0004545024 0.0010316536 -0.0012598474 -0.0004477108 0.0001862631 0.0003489503 0.0003030331 0.0000100510 -0.0001630827 -0.0001207423 -0.0004359794 -0.0004275579 -0.0005494586 0.0098213681 -0.0036391774 -0.0113164071 -0.0069943600 -0.0061801876 0.0024670895 0.0019931831 0.0009048319 -0.0020352757 0.0019892266 0.0021872338 0.0000777433 0.0006846872 0.0018443196 0.0015993763 -0.0015952297 -0.0016159751 0.0003842022 0.0002573502 0.0010835729 0.0014638426 -0.0020610276 -0.0017656341 0.0014173762 -0.0041897545 -0.0078351716 -0.0052048297 -0.0012498360 -0.0024137055 -0.0012704672 -0.0041928933 -0.0070623036 -0.0039176850 0.0048977223 -0.0023648575 -0.0030422266 -0.0051156625 0.0033517308 0.0022879659 -0.0083099922 0.0054914221 0.0068562668 -0.0063237619 -0.0043225360 0.0009001951 -0.0045820396 -0.0026760460 0.0024466393 0.0031413427 0.0037213239 0.0052171836 0.0004931031 -0.0017299146 -0.0088558956 0.0010501130 0.0029025793 0.0091277353 -0.0020062731 -0.0036798556 -0.0105013141 0.0138849821 0.0020401067 -0.0082502503 0.0134308872 0.0107536972 0.0124108947 0.0107583049 0.0052465732 -0.0123739477 0.0190071868 0.0165697276 0.0232371895 0.0283872379 0.0191537316 -0.0030902063 0.0010238431 0.0009772545 -0.0006954878 -0.0115848257 -0.0103960510 0.0060945771 0.0001491078 -0.0010217867 -0.0006424695 -0.0079810933 -0.0038269553 0.0067988593 -0.0023723253 -0.0028224909 -0.0003838499 0.0032970527 0.0046529182 0.0016709700 0.0000942777 -0.0002344423 0.0004714409 0.0027850466 0.0017690961 0.0003525262 0.0002355428 -0.0000573616 -0.0006042816 0.0040032936 0.0056671713 0.0005154814 -0.0045697917 -0.0137757096 -0.0058340607 -0.0033279124 -0.0470872914 -0.0181185026 -0.0201454173 -0.0349401181 -0.0076315845 -0.0300511557 0.0023226036 0.0174009566 0.0102261626 0.0059564554 -0.0192857413 -0.0007568202 -0.0044747383 0.0026283017 0.0030729223 0.0017714612 0.0001274624 -0.0035062635 0.0010840617 0.0047475542 0.0252540741 0.0067416963 -0.0328048004 -0.0161530747 -0.0470277068 0.0459982880 -0.0617768535 -0.0379704524 -0.0257821299 0.1090474681 0.0817644997 0.5605533041 0.0404192112 0.6688768642 0.0402276127 -0.0295642389 0.0104907002 -0.3309176230 0.0006918607 0.0009522037 0.0003569859 0.0015201374 0.0006855547 -0.0000372457 -0.0002466966 -0.0006931525 -0.0008506877 -0.0028633102 -0.0003801306 0.0014209919 0.0008111063 0.0004961141 0.0001425548 -0.0000304394 -0.0003704994 -0.0004390162 -0.0033413466 -0.0022042925 -0.0012758520 -0.0025429177 -0.0001838364 0.0004232609 0.0093868425 0.0023598659 -0.0012155143 -0.0030498046 -0.0023381307 -0.0006991720 -0.0002632974 0.0000775570 -0.0008338444 0.0015158595 -0.0012921864 -0.0002800099 -0.0000268811 0.0007102436 0.0012138002 -0.0017531686 0.0006190686 -0.0012190213 0.0009569095 -0.0009105234 -0.0004398822 0.0001779667 0.0004602307 0.0008930995 -0.0040979197 0.0041114107 0.0021074697 -0.0028309899 0.0013015739 -0.0005122689 0.0034264251 -0.0019914296 -0.0001892448 -0.0036477989 0.0032682596 0.0015435915 -0.0018417780 0.0006973090 -0.0001591969 -0.0022426120 -0.0000390774 0.0047284235 -0.0045676485 -0.0016952212 -0.0040444760 -0.0008715959 0.0001474360 -0.0014214851 -0.0014267290 0.0013165683 0.0017812916 0.0004308996 -0.0014426739 -0.0004431520 -0.0008319618 0.0015986685 0.0007509218 -0.0030438487 0.0011359353 0.0018067763 0.0004628745 -0.0012423675 -0.0003822223 0.0078543513 -0.0014534433 -0.0043956921 0.0053145177 0.0044427857 -0.0026458562 -0.0023869558 0.0012411461 0.0015424806 0.0017993416 -0.0005526504 -0.0011155165 0.0050646474 -0.0004317005 -0.0032947860 0.0019788629 0.0001048704 -0.0012126606 -0.0018290812 -0.0013203543 -0.0010672079 0.0012978969 0.0014556185 0.0006977797 -0.0027435023 -0.0006174773 -0.0015805725 0.0022813306 0.0001572901 0.0013109717 0.0047671102 -0.0015696778 0.0031699304 0.0013663825 -0.0019800306 0.0009750072 -0.0036102532 -0.0002848438 -0.0019646643 0.0006829250 0.0013320884 0.0002936327 0.0087444853 -0.0015988162 0.0047105976 0.0042090325 -0.0075752216 0.0028597080 -0.0093016403 -0.0030201226 0.0080424889 0.0335044189 -0.0048997979 0.1078147093 0.1407561525 -0.0401242508 -0.1091289950 -0.0216285251 0.0981621993 -0.1377378706 0.0055085091 0.0002261026 -0.0058123965 -0.0116073803 0.0359605889 0.0330769387 -0.0102088588 0.0227963453 -0.0093100074 -0.0152743582 -0.0377375541 0.0306787241 0.0072708299 0.0043522318 -0.0022292793 0.0171281169 -0.0026504132 -0.0077383748 -0.0061062516 0.0017976064 0.0029822665 -0.0075748784 0.0043330607 0.0051719862 0.0061954320 -0.0081927648 -0.0037829480 0.0063263536 0.0052600954 0.0032167907 -0.0069292398 -0.0023051136 -0.0045995880 -0.0054068908 -0.0007470192 -0.0025142123 0.0062853775 -0.0043368130 0.0025415808 0.0118380639 -0.0034984478 0.0051313388 -0.0030814801 -0.0021787280 -0.0007572742 -0.0025418119 0.0030256380 0.0006573323 0.0008946590 0.0007752885 0.0008192697 0.0000037355 -0.0010289486 -0.0008445324 -0.0005198049 0.0003044207 -0.0005057082 0.0164518109 -0.0234582341 -0.0107966842 -0.0147005442 -0.0126176584 0.0067096231 0.0051735142 0.0033696511 -0.0039112967 0.0034363958 0.0060490744 0.0027957741 -0.0004279143 0.0012484312 0.0029191848 -0.0026385236 -0.0024066837 0.0008682440 -0.0011931302 -0.0004963928 0.0013125355 -0.0009143683 -0.0004547554 0.0000308423 -0.0066412405 -0.0095054882 -0.0049407193 -0.0033603422 -0.0028886671 0.0023278562 -0.0026319873 -0.0048973230 -0.0005763274 0.0027974293 -0.0035994500 -0.0050325193 -0.0050399154 0.0059002458 0.0072730450 0.0058713041 -0.0147131517 0.0066598320 -0.0081979008 -0.0073027913 -0.0047381413 -0.0027408242 -0.0023877315 -0.0013467830 0.0021793062 0.0022299741 0.0034051271 0.0018057286 0.0012058867 -0.0035962398 -0.0002313731 0.0015352570 0.0078757711 0.0007413790 -0.0002850033 -0.0034897999 0.0102678701 0.0028218845 -0.0125725375 0.0222925821 0.0052790333 0.0185409139 0.0086716468 0.0041220562 -0.0142596205 0.0056903833 0.0055910366 0.0042958038 0.0177015199 0.0111563131 -0.0052741716 0.0009298917 0.0001925820 -0.0019938497 -0.0129285007 -0.0246830237 0.0162811398 0.0000879671 0.0005996428 0.0001916253 0.0096024266 -0.0174073735 0.0104135828 0.0128335721 -0.0078687701 -0.0201512509 0.0014417285 0.0072928372 0.0074088800 0.0016569612 -0.0012241871 -0.0011485945 0.0071577015 0.0003252704 -0.0034867523 0.0010252671 -0.0036617814 0.0006141321 -0.0006981385 -0.0007007806 0.0007533033 -0.0087208025 -0.0016114665 0.0055583073 -0.0017972606 -0.0016559235 0.0021692690 0.0047066688 -0.0705882408 0.0309556199 -0.0998055967 0.0045299824 0.0162730616 -0.0125690410 0.0636598171 0.0021655870 -0.0125538113 0.0122724296 -0.0404804809 -0.0149504665 0.0449228242 0.0154948372 0.0050647506 -0.0046683831 0.0278156515 -0.0030509741 0.0012149395 -0.0045311130 0.0008436690 0.0075868529 -0.0031453568 0.0050065836 -0.0017212846 0.0002273137 0.0062116973 0.0002362074 -0.0060037999 0.0348805018 0.0138413807 -0.0173625793 0.0011113793 -0.0047165766 -0.0445956000 -0.0005450658 -0.0017216429 -0.0011888697 -0.0037076817 -0.0019783847 -0.0004643576 0.0003751866 0.0015624821 0.0023958124 0.0027106258 0.0000305878 -0.0020589008 -0.0020480213 -0.0014782675 -0.0010745411 -0.0010097741 0.0011031993 0.0023889061 0.0107714432 0.0068777652 0.0029280245 0.0072667698 0.0009654595 -0.0023755873 -0.0016175033 -0.0003359534 0.0000307714 0.0091665204 0.0048161666 0.0017192944 0.0062848268 0.0001519716 -0.0025787229 -0.0022640042 0.0025031177 0.0014489277 -0.0006433149 -0.0006978082 -0.0023119462 0.0006131986 -0.0002087652 0.0002108582 -0.0003777965 0.0013074874 0.0018476050 -0.0024602987 0.0003629376 -0.0025872243 0.0084736797 -0.0079576834 -0.0028756657 0.0068854691 -0.0034852182 0.0037366244 0.0079127292 -0.0043462973 0.0014170707 0.0053239835 -0.0050831412 -0.0001936460 0.0088575482 -0.0020648069 0.0055253807 0.0001394461 -0.0000009557 -0.0002662967 0.0006633928 0.0002486269 0.0005686888 -0.0028088884 0.0004902660 -0.0050152662 -0.0032717698 0.0028517631 0.0038338060 -0.0032710426 0.0032493188 0.0022023300 0.0033680249 -0.0038872357 -0.0026029123 0.0078848146 -0.0036792505 -0.0047508418 0.0001705023 0.0041375243 0.0002922193 -0.0222803855 0.0032719483 0.0123877200 -0.0161962694 -0.0154315554 0.0078318893 0.0058996841 -0.0036791572 -0.0038965206 -0.0053817538 0.0021303411 0.0033784813 -0.0125099652 0.0002785468 0.0081357195 -0.0047769469 -0.0042707667 0.0025524589 0.0055679028 0.0021285025 0.0033230015 -0.0057624153 -0.0018447516 -0.0030480857 0.0052263693 0.0023804010 0.0028808679 -0.0063389681 -0.0016355361 -0.0035437299 -0.0063050470 0.0042206927 -0.0041680561 0.0009199116 0.0112743877 -0.0004772645 0.0078304425 0.0017914226 0.0041804491 0.0002698342 -0.0045533980 0.0004574754 -0.0201340751 0.0051125180 -0.0109380461 -0.0101783867 0.0229745374 -0.0072325735 0.0195897287 -0.0135311505 -0.0000142886 -0.2240073573 0.2629278128 -0.1116853575 -0.2747891231 -0.1293931465 0.0276095446 0.1753132323 0.1100097891 0.0674665451 0.0248564135 -0.0268187032 0.0120158607 0.2337397122 0.2083113623 0.1818476709 -0.3164637533 0.4797799066 -0.0926288648 -0.3165042354 -0.2025259202 -0.2689483140 0.0019608513 0.1068462097 0.0254724413 0.2352732085 -0.0970835647 -0.1187198362 -0.0742106947 -0.0236740506 0.0315925861 -0.1049544935 -0.0125845367 0.0356290225 0.1222969828 -0.0811920482 -0.0650258679 -0.1402106459 -0.0429885032 -0.0678424016 0.0986752131 -0.0386291307 0.0376913166 0.0640448962 -0.0462157546 0.0292381526 0.0278392970 0.1043863533 0.0282372267 -0.2568155293 -0.0141888675 -0.1180856094 0.0321138954 0.0138620869 0.0197820453 -0.0257496361 0.0224901981 0.0186541364 0.0010206415 0.0070453042 -0.0081652575 0.0000933243 -0.0025755879 0.0033935213 -0.0012357601 -0.0023269225 0.0037574722 -0.0033083895 0.0042998450 0.0055191928 0.0106811542 0.0072729700 -0.0078791070 -0.0042034198 -0.0044341036 0.0006702627 -0.0020824363 -0.0043581765 -0.0030342210 0.0024876347 0.0019555416 -0.0012010703 -0.0000474555 0.0013740547 0.0021556975 0.0022637794 0.0029492218 0.0000637821 0.0000710611 0.0021927845 0.0020405330 0.0020486581 0.0003643876 -0.0029327052 0.0056377200 -0.0019123017 -0.0129054272 -0.0014064247 -0.0064099192 -0.0061372385 0.0002704240 0.0011801312 0.0012238867 0.0000752091 -0.0003376735 -0.0009412383 -0.0003828913 -0.0001432453 -0.0000316903 0.0018231556 0.0011521335 0.0001765516 0.0011759132 0.0007959693 -0.0000811622 -0.0005769969 -0.0007202381 -0.0012663481 -0.0005310412 -0.0001599759 0.0013589518 -0.0000812415 -0.0005847518 -0.0019074248 -0.0000047858 0.0004475394 0.0018770788 -0.0021301897 -0.0009238037 0.0015817007 -0.0037843058 -0.0012652101 -0.0025037688 -0.0030798452 -0.0006749832 0.0040533760 -0.0027994101 -0.0023108832 -0.0025829120 -0.0058641088 -0.0038982574 0.0012696558 -0.0012030018 -0.0014962633 0.0005572178 0.0182244959 0.0147337868 -0.0107146162 -0.0121862643 -0.0335502209 -0.0413496136 -0.0001792378 0.0005790167 -0.0000457278 0.0005086733 -0.0001565309 -0.0006019854 0.0000294914 0.0000651546 0.0001918614 -0.0001366788 0.0000276430 -0.0001820036 -0.0006660572 -0.0005413921 0.0000769016 0.0006042969 -0.0000763656 -0.0003611259 -0.0000522692 -0.0000011062 -0.0000522354 -0.0003991087 -0.0000342139 0.0002000439 -0.0003210571 -0.0000133794 -0.0000529549 0.0046111872 0.0090807032 0.0013307493 0.0076307175 -0.0006379796 -0.0049947540 -0.0022472885 -0.0012843784 0.0043124290 -0.0036347285 -0.0046272701 -0.0012911821 0.0012298983 0.0041005170 0.0010828554 -0.0042022538 0.0012934376 0.0062501389 0.0009626629 -0.0006617887 0.0018133937 0.0003081569 -0.0012309190 -0.0008747383 0.0002652058 0.0015791345 0.0008796202 0.0037090615 0.0012148222 0.0004055736 -0.0002332654 0.0013689166 0.0001291846 0.0019837018 -0.0030777033 -0.0008969486 0.0031014134 -0.0399546018 -0.0418800576 -0.0425482104 -0.0101041105 0.0138440488 0.0249937259 0.0200632246 0.0145634588 0.0034790063 -0.0224014768 -0.0456398695 -0.0310197194 -0.0047345041 0.0158493721 0.0272978386 0.0200512432 0.0072025387 0.0949465030 0.0681483869 0.0535600396 0.0042691200 0.0205694559 0.0444526595 0.0066313946 0.0047330033 -0.0058118319 0.0613729233 0.0487844001 0.0456977364 -0.0290164630 0.0115620098 0.0740322528 0.0371284124 -0.0207687913 0.0101942943 -0.0177314504 0.0229971046 0.0169689810 -0.0101148616 -0.0150842389 -0.0447661032 0.0283924614 -0.0138489992 0.0127692351 -0.0204619930 0.0242572917 0.0094958142 -0.0726383536 0.0795090672 0.0617995960 -0.0005995693 0.0176030325 0.0416617537 -0.0048401872 0.0035907888 -0.0053499317 -0.0453491636 0.0544763027 0.0497742356 0.0267037528 -0.0027258850 0.0673480060 -0.0056595095 -0.0006847954 0.0120684426 0.0002365295 -0.0005725100 -0.0006234447 0.0060110144 -0.0013223356 0.0105844749 -0.0010189623 0.0004317506 0.0004472044 0.0919486987 -0.0114392579 -0.0490698202 -0.0689237125 -0.0101008034 0.0401330735 0.0447362868 0.0309055283 -0.0221327484 -0.0745133737 -0.0027153385 0.0423497535 -0.0591203205 0.0686087252 0.0395431260 0.0443831733 0.1647822448 -0.0094690474 0.0791281732 0.0258588887 -0.0472271722 0.0130690264 -0.0871931844 -0.0152980594 -0.2239927795 0.1107689641 0.1637359383 -0.1005389483 0.3545396309 0.0897878596 0.0560053004 -0.0332966874 0.0347793843 -0.0873955980 0.0195260414 -0.0453582377 -0.0696509178 0.0484007669 -0.0472522624 -0.0353003078 -0.0750783334 -0.0142905216 0.2590903380 0.0249424402 0.1754689010 0.2056860805 0.2916069734 0.0944458267 -0.0363940334 0.0440103719 -0.0228008188 0.0696195408 -0.0271716283 0.0409375470 0.0861251612 0.0439925363 0.0443480241 0.0132160380 0.1606465344 -0.0026190346 -0.0002062718 0.0004211425 -0.0001943930 0.0042214853 -0.0061175923 -0.0007883032 0.0023693734 0.0039637713 0.0023380329 -0.0037104116 -0.0054170082 0.0021452278 -0.0012840816 0.0000726094 -0.0007118516 -0.0063125161 0.0004247197 0.0010931080 0.0130216849 -0.0092032459 -0.0029037723 0.0103237819 0.0036051937 0.0138217047 -0.1136407314 -0.0284030788 0.0439089452 -0.1710329414 0.0112804658 0.0771385899 0.0679400058 -0.0292661952 -0.0340815060 0.0942763021 -0.0412111016 -0.0412102004 -0.0063253101 0.0749133302 0.0090418591 0.0168124044 0.0682424853 0.0059224586 -0.0979909201 -0.0180811629 -0.0387796663 -0.0687109114 -0.0098239143 -0.0311275052 0.1019675064 -0.0553282259 0.0415769370 0.1454336661 -0.0466715230 0.0639551438 -0.0040504711 -0.0109924074 -0.0022890413 0.0029858935 -0.0140210620 -0.0031569690 0.0001479938 -0.0035569733 0.0018337637 -0.0004656053 0.0019535673 -0.0003664833 -0.0001181323 0.0007204286 -0.0012026996 -0.0005125919 -0.0004331206 -0.0000722569 -0.0026140295 -0.0018166913 0.0018070842 0.0008655346 0.0008803002 -0.0001517106 0.0003860741 0.0011011610 0.0008590322 -0.0004104617 -0.0001535262 0.0004341346 0.0000439594 -0.0004729654 -0.0007081301 -0.0004658837 -0.0004534583 0.0001801479 -0.0001836133 -0.0007460820 -0.0005306488 -0.0007958414 -0.0006335675 0.0001941610 -0.0015004549 0.0004310674 0.0029153446 0.0007826177 0.0003134998 0.0017227719 0.0004301021 -0.0005004128 -0.0006612915 -0.0001403027 0.0002085805 0.0004494594 0.0000018941 0.0003117307 -0.0000092691 -0.0008403032 -0.0005226037 0.0001739134 -0.0007208061 -0.0004163860 0.0002439692 0.0004653492 0.0004870052 0.0007267524 0.0001102600 -0.0001737450 -0.0011245312 0.0001408628 0.0003883605 0.0011988385 -0.0001902497 -0.0004755274 -0.0013890806 0.0008678832 0.0012339856 -0.0006462644 0.0019298607 0.0007712411 0.0012962072 0.0017282605 0.0004377157 -0.0018059901 0.0021905638 0.0022747348 0.0026789966 0.0038347845 0.0025105626 -0.0005280086 0.0004334231 0.0004583657 0.0000002368 -0.0050557740 -0.0034575737 0.0020111489 -0.0008260040 0.0014198715 -0.0027572886 0.0002432923 0.0000210930 -0.0001764705 -0.0005288367 0.0000590428 0.0004644325 0.0000247498 -0.0000585041 -0.0000808221 -0.0000371151 -0.0000218954 -0.0000045971 -0.0005001236 -0.0000784041 0.0000797406 -0.0000526821 -0.0001765291 0.0000999065 -0.0000049821 -0.0000097267 0.0000027588 0.0002744018 -0.0000156935 -0.0001543819 0.0003319384 -0.0002199139 -0.0002053397 0.0013749299 0.0046317470 -0.0001760251 0.0060623299 -0.0003125005 -0.0018891937 -0.0002108633 -0.0027802085 0.0012475906 0.0004804439 0.0015174822 -0.0012151607 -0.0009975069 0.0007631220 0.0003584360 0.0008375129 -0.0003091052 -0.0003605601 -0.0002537084 0.0000385356 0.0000644678 0.0000829782 0.0002983067 -0.0002020809 0.0002885817 0.0000503170 0.0000533959 -0.0024922619 -0.0005656969 0.0026356151 -0.0006155471 0.0019416251 0.0005355792 -0.0016940171 0.0025687898 0.0001857930 0.0052398080 0.0036847461 -0.0022655053 0.0377833282 0.0283263500 0.0176118594 0.0115430060 -0.0146114395 -0.0347810564 -0.0426364790 -0.0123459991 0.0098613432 0.0165655618 0.0226972039 0.0280672627 0.0341093818 -0.0066154086 -0.0382299870 -0.1318497505 -0.0771829809 -0.0182972224 -0.1238583587 -0.0085631560 0.0721208104 0.0170237787 0.0043009990 -0.0035924925 -0.1211673473 -0.0553631497 -0.0021610393 -0.1325319107 -0.0017315070 0.0985333327 -0.0296717078 0.0368105798 0.0242335369 -0.0177214705 -0.0066596861 -0.0375629391 0.0397145538 -0.0252528538 0.0053474618 -0.0129781284 0.0265681815 0.0335913567 -0.0363957397 0.0059219444 -0.0398518796 0.1168834976 -0.1125678236 -0.0322899402 0.1192925038 -0.0493129723 0.0691610119 -0.0077884029 0.0042662702 -0.0018080011 0.1124649242 -0.0892728662 -0.0140060548 0.1381493203 -0.0476998264 0.0977646565 -0.0022546311 -0.0001648057 0.0046451711 -0.0038219463 -0.0014175476 -0.0034567359 0.0000758559 -0.0000758119 -0.0000540055 -0.0004664750 0.0005028351 0.0006066988 0.0687415101 -0.0552067798 -0.0444015608 -0.0868801559 0.0423223003 0.0536429893 -0.0636662494 0.0654988329 0.0419410628 -0.0485953504 -0.0681088832 0.0214892978 0.2337165436 0.0052940315 -0.1273489940 0.2322309703 0.2810550834 -0.1061159338 -0.0273955393 0.0498259887 0.0215047532 0.0676106755 -0.0463157457 -0.0441890989 0.0560731438 0.0421298933 -0.0298758974 0.0189883506 0.1918562514 0.0037567364 0.1026416589 0.0093661874 0.0576637707 -0.0915359608 -0.0274187337 -0.0491499939 0.0382179629 0.0421040361 0.0198358327 -0.0836410781 -0.0277367244 -0.0463282562 -0.0253995415 0.0617887882 -0.0206186426 0.0585913431 0.2122391438 0.0146585215 0.0803619935 0.0440028525 0.0415391192 0.0298360123 -0.0826740867 0.0224118088 -0.2183913028 0.0857900734 -0.1221080024 -0.1322107854 0.3582065575 -0.0979718545 0.0000568320 -0.0001220814 0.0000475402 -0.0011638210 0.0014534398 -0.0002057650 -0.0008645454 -0.0007929750 -0.0002309666 0.0009960997 0.0011261522 -0.0001492177 -0.0000573517 0.0000337238 0.0005379163 0.0029266671 -0.0036154710 -0.0037654376 -0.0022697232 -0.0004040901 0.0018479053 -0.0005054482 0.0029720990 -0.0059590219 -0.0528509049 0.0984483050 0.0459826434 0.1081720700 -0.0947388822 -0.0611606477 -0.0391127612 -0.0501059159 0.0125737396 -0.0362856284 -0.1180868361 0.0026131488 0.1139268250 -0.0397815392 -0.0608576088 0.1275606061 0.0090777955 0.0658545717 -0.0087913702 0.1237066776 -0.0063768443 -0.0316663375 0.0615677817 -0.0144804916 -0.0713346998 -0.0853016659 -0.0447793256 0.1583164270 0.0507833855 0.0739015122 -0.0375621965 -0.0114522983 -0.0157396335 -0.0303257873 0.0205036761 0.0138181709 -0.0069378124 0.0002479342 -0.0002237570 0.0055501898 -0.0059137897 -0.0036784138 0.0070063425 0.0063378606 0.0046882973 -0.0088889019 0.0057814213 0.0164784885 -0.0039972140 -0.0015199673 0.0050561585 0.0023868455 0.0034449296 0.0010356903 -0.0005659298 0.0030197138 0.0041827696 -0.0026055709 -0.0035460146 -0.0008654934 0.0010028868 -0.0004974251 -0.0025036829 -0.0018706099 -0.0027460680 -0.0008996443 0.0013849073 -0.0002104464 -0.0018627439 0.0016007854 0.0053814499 0.0058451087 -0.0042051066 0.0029294012 0.0112718821 0.0044129647 0.0088343942 0.0077004971 -0.0039994574 -0.0007125164 -0.0005798768 0.0069958073 -0.0004219161 -0.0056832293 -0.0017555794 0.0013236123 0.0186910725 -0.0058938246 -0.0033603489 0.0013516476 -0.0052485977 -0.0037679991 -0.0004482537 0.0007195022 0.0014176262 0.0038100844 0.0021868514 0.0007449678 -0.0027191681 0.0000089997 0.0012649068 0.0053453973 0.0027865034 0.0012058393 -0.0028314729 0.0086480149 0.0027782416 -0.0134618575 0.0029020818 0.0005227597 -0.0050643718 0.0069155965 0.0025350934 -0.0103037190 0.0051772724 0.0039972206 -0.0000073617 0.0182395004 0.0112634341 -0.0048868500 0.0001100569 0.0005441823 -0.0014776003 -0.0055198991 -0.0105017546 0.0110168804 0.0094605223 0.0306338028 0.0336396925 -0.0024976569 -0.0015436744 0.0030395302 0.0034838771 -0.0018444339 -0.0049216866 0.0000692626 0.0008627029 0.0011698892 0.0000995047 0.0001798445 0.0000358866 0.0014564995 0.0006485450 -0.0002273347 -0.0002881250 -0.0012608964 0.0013257399 0.0000288793 -0.0003811623 0.0000383607 -0.0009708782 0.0001551502 0.0008979387 -0.0011761698 0.0007368098 0.0015361741 -0.0065020621 -0.0174939700 -0.0000696423 -0.0162217373 0.0009052424 0.0086066910 0.0024277115 0.0051167439 -0.0054624328 0.0030651880 0.0152292486 -0.0143015662 -0.0105709629 0.0061291393 0.0031193402 0.0097476514 -0.0039720399 -0.0059391221 -0.0016453438 0.0002943447 -0.0008362922 0.0003738166 0.0028566801 -0.0008319230 0.0014013880 0.0001953461 0.0003734046 0.0024214682 -0.0005869903 -0.0144354799 0.0081626385 -0.0105575725 -0.0050715358 0.0017537909 -0.0036125710 -0.0036691888 0.0027623535 -0.0346478122 -0.0341833265 -0.0170231952 0.0053518257 0.0193364512 0.0250960316 0.0101764721 -0.0029775484 -0.0185163166 -0.0262931673 -0.0355394512 -0.0148795474 0.0091826835 0.0278977335 0.0391324178 0.0131572134 -0.0142608236 0.0166075943 0.0170952422 0.0364431573 -0.0524772447 0.0126557658 0.0699538423 0.0126626814 0.0056194027 -0.0071214798 -0.0129676889 0.0103951318 0.0363350685 -0.0905239265 0.0049156905 0.1122169392 -0.0181884015 0.0018582110 -0.0174967358 0.0202872367 -0.0161010488 -0.0002577507 -0.0087036118 0.0245999731 0.0370392649 -0.0158940231 -0.0020836057 -0.0257003098 0.0317607085 -0.0222148726 0.0102164075 0.0137591285 -0.0171146148 -0.0379813299 -0.0449990677 0.0048332246 -0.0608762622 0.0085666443 -0.0051996536 0.0062192079 -0.0131590446 -0.0037296251 -0.0340903394 -0.0792110788 0.0259800390 -0.0973253728 -0.0057317016 -0.0006325546 0.0120456787 -0.0007880099 -0.0008037268 -0.0013723791 -0.0056735305 0.0012175374 -0.0098553675 0.0007897488 -0.0004361665 -0.0004216897 0.1407269499 -0.0162173890 -0.0765367469 -0.1055928294 0.0170394183 0.0650987482 -0.0251650434 0.0627689230 0.0199345134 -0.0841399042 -0.0550822990 0.0430169812 0.1681106153 0.0326178306 -0.0884061467 0.2006581596 0.3099824252 -0.0854213739 0.0055497307 0.0581098421 0.0020871809 0.0705464570 -0.0881543135 -0.0495887655 -0.0422564980 0.0850385471 0.0389451844 -0.0278182640 0.3389156409 0.0448052108 -0.0991409368 0.0216926424 -0.0607562616 0.1364384434 -0.0350531348 0.0726824726 -0.0082283310 -0.0557872437 -0.0001546607 0.0907268420 0.0618400723 0.0476400979 -0.0792260491 -0.0626580699 -0.0496147968 -0.1391872511 -0.3076791204 -0.0541337929 -0.0371241994 -0.0486951122 -0.0172273170 -0.0625097944 0.0734977125 -0.0401157908 0.1314884887 -0.0808723400 0.0747000823 0.0817033631 -0.3373420769 0.0681447849 0.0009269305 -0.0002268412 -0.0000561980 -0.0070110747 0.0100956243 -0.0012176283 -0.0084754914 -0.0067284862 -0.0020866189 0.0045910280 0.0048190894 -0.0010610934 0.0045119232 -0.0014659028 -0.0034969312 -0.0072776023 0.0403256972 0.0396915846 -0.0179973121 0.0404955376 -0.0144438480 -0.0285391051 -0.0448354583 0.0204188235 0.0009448592 -0.0012545873 -0.0006710328 -0.0014995662 0.0012424455 0.0008527389 0.0005172829 0.0006373443 -0.0001805051 0.0003626089 0.0017449963 -0.0000746381 -0.0018653029 0.0007322640 0.0011439633 -0.0031072484 -0.0008543374 -0.0013987062 0.0010584582 -0.0019564205 0.0005376513 0.0013433815 -0.0008997138 0.0006045033 0.0002828932 0.0018734198 0.0003265255 -0.0042350844 -0.0003369537 -0.0019132182 0.0012461945 0.0002742457 -0.0000111926 0.0008405709 -0.0008881752 -0.0004936963 -0.0014315721 0.0021544623 0.0019063907 0.0017415134 -0.0026866696 -0.0023683397 0.0008047348 -0.0016941631 -0.0009278647 -0.2436131041 0.2116635529 0.3227600770 0.0896983298 0.0702557368 -0.0496640814 -0.0365560278 -0.0293788266 0.0193676361 -0.0315259627 -0.0298803518 -0.0064956016 0.0135277309 0.0028745846 -0.0174040384 0.0107328542 0.0120754207 -0.0014986999 0.0122455000 0.0113737943 -0.0056157586 0.0046813274 0.0149013932 0.0118521542 0.0287703532 0.0340488840 -0.0013658092 0.0305011869 0.0044024120 -0.0465828169 0.0170761582 -0.0040714656 -0.0121368148 -0.0332835950 0.0078768022 0.0141297772 0.1087375876 -0.0094165954 -0.0779229738 -0.0608731754 0.0778923234 0.3000643233 -0.1126255272 -0.0649885342 0.0264334406 -0.1033179605 -0.0696834447 0.0100322527 0.0186340090 0.0344483867 0.0886654568 0.0423984882 0.0113069303 -0.0729940105 0.0108902908 0.0317431316 0.0987197445 0.0330334938 -0.0004976426 -0.0945777445 0.1603451593 0.0609244172 -0.2111636051 0.1130670493 0.0763050510 0.0204516285 0.1638613848 0.0570515373 -0.2376460940 0.1466126500 0.1226387540 0.0770240038 0.3761551574 0.2415650987 -0.0797606422 -0.0035659238 -0.0055285953 -0.0006732726 0.0636749395 0.0559858904 -0.0330637388 -0.0001828070 -0.0004891168 -0.0004178347 -0.0062571631 0.0034950707 0.0153149086 0.0040679330 0.0047955486 0.0022685647 -0.0020526423 -0.0063225586 -0.0043403078 0.0002816045 0.0006478314 0.0001609579 -0.0033662304 -0.0025451655 0.0003960742 -0.0004489334 0.0010326588 -0.0016569681 -0.0002669800 -0.0000426322 -0.0003507453 -0.0000260926 0.0008697191 0.0008021229 -0.0038740727 0.0034230381 0.0068586907 0.0199195264 0.0452720875 0.0026758867 0.0336469593 -0.0026021190 -0.0226910469 -0.0089943973 -0.0036794227 0.0148374379 -0.0026946286 -0.0158139256 0.0150607801 0.0134026986 -0.0035993073 -0.0024916056 -0.0088427206 0.0033710290 0.0080818656 0.0000469825 -0.0009452473 0.0036281757 0.0003612234 0.0003716558 -0.0014876830 0.0025993086 0.0030144527 0.0015020682 0.0015326929 -0.0039385131 -0.0529065121 0.0362014253 -0.0382794034 -0.0207497699 0.0036419500 -0.0070402993 -0.0196764032 -0.0002780872 0.0000772016 0.0000154376 0.0008012513 0.0002896264 0.0000866179 -0.0003974647 -0.0004955267 -0.0000286211 -0.0002717333 0.0002091918 0.0005115441 0.0006723615 0.0002488010 -0.0004780425 -0.0009940048 -0.0000705371 0.0006171136 -0.0016882560 -0.0013920077 -0.0003224676 -0.0008475918 0.0021386203 -0.0020646563 0.0005765440 0.0000546150 0.0008406326 -0.0006763141 -0.0018672183 -0.0008318846 0.0019925663 0.0000645577 -0.0021971233 0.0001951498 -0.0001031171 0.0000133358 0.0002529963 0.0001040749 0.0004936378 -0.0005984847 0.0000703128 -0.0005739338 0.0001616153 -0.0001457427 -0.0000073676 0.0000868523 0.0001221670 0.0002093295 -0.0009804465 0.0005414215 0.0006002381 -0.0005175288 0.0004140585 -0.0001187063 0.0011689450 -0.0005991486 0.0005420575 0.0001356385 0.0001207387 0.0000237050 -0.0008255206 -0.0003001947 0.0001846205 0.0000419542 -0.0001058452 -0.0003995119 -0.0004485265 -0.0001401616 -0.0002596072 -0.0004579223 0.0000586819 -0.0008183869 -0.0004604887 0.0003709468 0.0004439736 -0.0020559490 0.0002873535 0.0011223931 0.0016453606 -0.0002140258 -0.0009876926 0.0003774239 -0.0009513744 -0.0002924927 0.0012624397 0.0008606999 -0.0006372416 -0.0026155956 -0.0004706917 0.0013389508 -0.0030909681 -0.0046864978 0.0013082171 -0.0000530351 -0.0008940829 -0.0000500914 -0.0010678227 0.0012707050 0.0007519877 0.0003340119 -0.0012203689 -0.0004149225 0.0003449909 -0.0049600623 -0.0006383526 0.0011601742 -0.0005582582 0.0007256874 -0.0017201539 0.0007818254 -0.0009070043 -0.0003923598 0.0007936187 -0.0003006270 -0.0009687654 -0.0011012814 -0.0004728159 0.0021389719 0.0007224870 0.0013487107 0.0024754971 0.0042967732 0.0010743777 -0.0001705777 0.0005426313 -0.0001307757 0.0009938824 -0.0005454664 0.0005954391 -0.0001023607 0.0007165374 -0.0001056902 -0.0001797718 0.0030402945 -0.0003010357 -0.0002869796 -0.0053116372 -0.0032865705 -0.0185791629 0.0364869111 0.0249752008 0.0014554606 -0.0128560676 -0.0145748310 0.0224562473 0.0343575970 -0.0217485952 0.0012819644 0.0061039713 0.0153369656 0.0749826492 -0.1472178524 -0.1533456345 -0.0655019599 -0.0681230695 0.0899942628 0.0102309153 0.1208595689 -0.1946452417 -0.0002905448 -0.0030289230 -0.0005223026 -0.0062796719 0.0027369818 0.0030093515 0.0024760480 0.0006855093 -0.0010493242 0.0023315033 0.0024822151 -0.0008921120 -0.0044852307 0.0029906656 0.0024232925 -0.0044686319 -0.0008778880 -0.0023436226 0.0007164689 -0.0031090716 0.0006046749 0.0016099114 -0.0012814741 0.0007441329 0.0009137530 0.0024134693 0.0007452364 -0.0052766543 -0.0006799045 -0.0023860845 0.0021248318 0.0009708604 0.0003757571 0.0018399932 -0.0013996126 -0.0003451640 -0.0009410514 -0.0011887857 -0.0007349141 -0.0002979707 0.0009648971 0.0006428747 0.0017610578 0.0011382323 0.0003179267 -0.0423102258 0.0607788087 0.0297302174 0.0008412952 0.0008801595 0.0007122462 0.0001982879 0.0007892569 0.0006441007 -0.0052407034 0.0008862951 0.0050986416 -0.0001926317 -0.0017683288 -0.0022829752 -0.0003825114 -0.0011946656 -0.0010868993 0.0020476483 0.0020433469 -0.0003095165 -0.0008009934 -0.0009877205 0.0027265137 0.0013058132 0.0005675415 -0.0002094980 0.0000385241 -0.0012396232 -0.0024241360 0.0022323615 0.0009697775 -0.0006976431 -0.0048466587 -0.0020259100 -0.0014614850 0.0180892472 0.0013191177 -0.0166744817 -0.0093151013 0.0075307773 0.0603643869 -0.0204552913 -0.0125298297 0.0050706345 -0.0199079458 -0.0135760944 0.0016714703 0.0029483868 0.0061453035 0.0163133387 0.0076034293 0.0024855020 -0.0131932468 0.0022044012 0.0059627691 0.0180048623 0.0070369694 0.0011179388 -0.0160592054 0.0313319220 0.0092925442 -0.0401531998 0.0236588540 0.0080824425 0.0045208483 0.0300224416 0.0107272567 -0.0435462885 0.0261081505 0.0208021895 0.0113314067 0.0692462574 0.0438356881 -0.0150261365 0.0025528653 0.0035897209 -0.0022992807 -0.0336516018 -0.0265864813 0.0163166871 -0.0002190090 -0.0007370095 -0.0006272835 -0.0243451290 -0.0043119095 0.0068947761 0.0442585018 -0.0018475962 -0.0350949928 -0.0015899975 0.0035753648 0.0063783267 0.0005272229 0.0016722069 -0.0003190376 0.0079004772 0.0054658392 -0.0003174852 -0.0007535362 -0.0007590180 0.0003372775 -0.0002059515 -0.0011293894 0.0006397716 -0.0205921675 -0.0026958734 0.0111621980 -0.0130064813 0.0058441986 0.0138907273 -0.0524284741 -0.1112181216 -0.0100240065 -0.0823921401 0.0055783306 0.0584381626 0.0244283372 0.0103183872 -0.0424719521 0.0041471203 0.0012037338 0.0068739955 0.0057909176 -0.0063566680 -0.0012506115 -0.0024954734 -0.0000735102 -0.0076204642 -0.0014920173 0.0008649084 -0.0057424220 0.0003777937 0.0055241929 -0.0005220042 0.0001913439 -0.0009470009 0.0003831316 0.0684056073 0.0102901795 -0.1169952298 0.0852796743 -0.0626110418 -0.0488109302 0.0444945645 -0.0728492086 -0.0745428984 -0.0001927254 0.0007377847 0.0005025547 0.0010481170 0.0003992045 0.0000389030 -0.0001570386 -0.0005173998 -0.0005569896 -0.0004443762 0.0003645031 0.0010298172 0.0007353542 0.0001473362 -0.0003530220 -0.0006442127 -0.0003732484 0.0000469213 -0.0030152647 -0.0014066894 -0.0011851814 -0.0012549150 0.0006230515 -0.0009016224 0.0007801621 0.0002696624 0.0008081752 -0.0014747157 -0.0012483589 -0.0010426674 0.0008210305 0.0000922877 -0.0018515505 0.0010912761 -0.0006478665 0.0002321714 -0.0006923342 0.0006302774 0.0001645702 -0.0010419794 0.0001523625 -0.0012435050 0.0006579718 -0.0001777205 0.0005392896 -0.0007392176 0.0006161433 -0.0001669560 -0.0011910611 0.0012481738 0.0013825556 0.0005903072 0.0001109072 0.0014969874 0.0047591194 -0.0027082339 -0.0004796138 -0.0012397394 0.0018295254 0.0014682578 0.0023939580 -0.0007647867 0.0029012616 0.0000291544 -0.0000454546 -0.0002876844 -0.0005743883 -0.0002545061 -0.0004898803 -0.0012419683 0.0002248313 -0.0018865059 -0.0020738593 0.0018344565 0.0025368049 -0.0031073365 -0.0001879157 0.0015830038 0.0022942421 0.0001959924 -0.0013335558 -0.0006873365 -0.0008407775 0.0003093365 0.0020347036 0.0005001929 -0.0011201054 -0.0004927986 -0.0012484468 0.0000275046 -0.0020619435 -0.0049350422 0.0006008784 -0.0010241702 -0.0010333425 0.0005161454 -0.0009812066 0.0021786036 0.0007684160 0.0029425019 -0.0023594031 -0.0022698793 0.0014621091 -0.0080384328 -0.0016291814 0.0022381261 -0.0007198966 0.0013575668 -0.0029163955 0.0010117695 -0.0015555031 -0.0002160400 0.0013128044 -0.0002326339 -0.0018550894 -0.0016298532 -0.0009478466 0.0023897515 0.0013573439 0.0013818431 0.0036423011 0.0069982851 0.0014228633 0.0002005990 0.0009915066 0.0000421782 0.0015310735 -0.0012122304 0.0009402169 -0.0013979076 0.0014542686 -0.0008329505 -0.0009966365 0.0062686733 -0.0010270852 0.0055643959 0.0074487676 0.0014828769 0.0217390330 -0.0324750672 -0.0304258256 -0.0190241260 0.0068445930 0.0162642153 -0.0403360393 -0.0542656690 0.0170099090 0.0136383742 -0.0012614744 -0.0532974007 -0.3005483899 0.3481316536 0.3704877179 0.1810832230 0.0630135781 -0.1682270028 0.0040956376 -0.3407207919 0.5919028185 0.0000108636 0.0001605117 0.0000274738 0.0002470956 -0.0001329861 -0.0000364659 -0.0000361616 -0.0000794848 -0.0000079207 -0.0000846857 0.0001645439 0.0000479401 0.0000372002 -0.0001250792 0.0000303173 0.0001035807 0.0000175741 0.0001042834 0.0002171485 -0.0000129900 0.0000940533 -0.0001152668 -0.0001113589 -0.0000958443 -0.0001343648 0.0003169481 -0.0000438602 -0.0004304790 -0.0000525844 -0.0000678414 -0.0002044250 -0.0002408277 -0.0000073782 -0.0000288584 -0.0001647093 -0.0001049040 0.0002972597 0.0013802667 0.0008631146 0.0007296601 -0.0015383249 -0.0009339167 -0.0012892265 -0.0010607599 -0.0005736769 0.0371479245 -0.0488098851 -0.0505729119 -0.0277816280 -0.0170011652 0.0222410248 0.0105052427 0.0122108249 0.0002560160 0.0107539552 0.0115539508 0.0031974393 -0.0078334023 -0.0061888845 0.0041004426 0.0018715917 -0.0052844566 -0.0111365144 -0.0073252135 -0.0059799915 0.0041710821 -0.0004678403 -0.0064418844 -0.0112511036 -0.0043787991 0.0043597871 0.0131086069 -0.0182999013 0.0063989080 0.0418731817 -0.0016218151 0.0101714687 0.0160055605 -0.0025774663 -0.0007772783 0.0015257371 -0.0071293266 0.0020396095 0.0078114887 0.0220129238 -0.0208914376 -0.0338903652 0.0081363705 0.0029977878 -0.0083469518 0.0079074780 0.0040798448 -0.0056385262 -0.0045658346 -0.0039293476 -0.0049308033 0.0011192089 0.0025753863 0.0095917502 -0.0047120382 -0.0044877003 -0.0035358865 0.0009259409 0.0039681631 0.0120248960 -0.0057510185 -0.0098761783 0.0070479533 -0.0171276653 -0.0075834623 -0.0175777916 -0.0080254524 -0.0043314609 -0.0013212321 -0.0169694602 -0.0187401974 -0.0203987962 -0.0297747004 -0.0199627572 0.0001965322 -0.0005135883 0.0002009480 0.0040066931 0.0265151807 0.0267017572 -0.0139148867 0.0002890413 -0.0000801944 0.0003585282 -0.0571457014 -0.0143732614 0.0231134680 0.1714982777 0.1455778889 0.0526896750 -0.0334541017 -0.0730405142 -0.0563334706 -0.0016623966 -0.0037357811 -0.0014144606 -0.0017614941 0.0005477032 0.0005377042 0.0014416294 0.0021803827 -0.0000444768 -0.0008107280 0.0030017333 0.0013497306 -0.0902257746 -0.0303757075 0.0273337772 -0.0520550409 0.0180647494 0.0551201815 0.0279576010 0.0478891326 0.0111893861 0.0252595805 0.0028695742 -0.0510041325 -0.0153544900 0.0042910955 0.0294930298 -0.0080633580 0.0067653493 -0.0218152001 -0.0126994986 0.0224880329 0.0060132103 0.0218079424 -0.0037426819 0.0238030769 -0.0305754465 0.0057436788 0.0210747575 0.0116769106 0.0200231981 -0.0255713641 0.0346285134 0.0057705439 0.0036937813 0.3403390790 0.0883173863 -0.2911761746 0.3593968783 -0.0318959209 -0.1755524819 0.2164991639 -0.3355339232 -0.4491655295 0.0000454589 0.0000768658 0.0001353479 -0.0002065652 -0.0001198584 -0.0001056734 0.0001006904 0.0000826705 -0.0000454808 -0.0005439885 -0.0001692673 0.0001345770 -0.0001758080 -0.0000771690 0.0001062749 0.0002969466 0.0000295213 -0.0001845681 0.0007997020 0.0002344782 0.0002232088 -0.0000154861 -0.0004233549 0.0005710039 0.0023027054 0.0005083497 -0.0012564352 0.0001179339 0.0005183367 0.0000935119 -0.0003628644 0.0001657715 0.0002823179 0.0000043022 0.0000254654 -0.0000630956 -0.0004098772 0.0000543124 -0.0006118889 0.0021099546 -0.0011561526 0.0006829705 -0.0001241288 0.0002543361 0.0003253589 -0.0004132911 0.0000866486 -0.0004241896 -0.0000204289 -0.0003029043 -0.0000123159 -0.0004571939 -0.0010760724 0.0005572641 -0.0079474938 0.0040001393 -0.0014337081 0.0002904034 -0.0003699614 0.0002049428 0.0009849203 -0.0001682526 0.0005650444 -0.0007421306 -0.0000256100 0.0016839603 -0.0009654818 -0.0003091356 -0.0007368660 0.0027165206 -0.0003410102 0.0043332996 0.0031008034 -0.0024203027 -0.0033997915 0.0000499757 0.0000072635 -0.0000144760 0.0000087635 -0.0001056909 -0.0000174172 0.0001100474 0.0000475951 -0.0000578744 -0.0001434460 -0.0001275150 0.0000702513 -0.0000376326 0.0001228997 0.0001005986 0.0001111832 0.0001794594 0.0000223637 0.0000835759 -0.0000291889 -0.0000559436 -0.0000245921 0.0000711297 0.0000225522 -0.0003285514 0.0000931788 0.0002927115 -0.0000103251 0.0001236694 0.0000782167 -0.0002774950 -0.0000381450 -0.0001609414 0.0002290343 0.0000537629 0.0001394475 -0.0000354407 -0.0001105842 -0.0000175698 0.0001993649 0.0001658425 0.0001022116 -0.0000143728 -0.0001195705 0.0000960667 -0.0002600974 -0.0004940002 -0.0000492633 -0.0000828191 -0.0000792606 -0.0000462468 -0.0000580977 0.0000038658 -0.0000337981 -0.0000406438 -0.0001028877 0.0000559499 0.0000575625 -0.0004417137 0.0001192574 0.0059503789 0.0075899240 0.0015195210 0.0946873390 -0.0809048927 0.0559264553 0.1094567842 -0.0029207425 -0.0601478322 -0.1144449417 -0.0395484259 -0.1121662804 0.0226458595 0.0160230784 0.0110585180 0.0549266724 -0.0960127529 -0.1107359880 -0.1216364411 0.0008826010 0.0989856111 -0.0712200455 0.0298551424 -0.1886954806 -0.0001394551 0.0004771094 0.0001072711 -0.0000388238 -0.0002430266 -0.0000883314 -0.0001016555 -0.0001760804 0.0000616259 -0.0000700807 -0.0011352210 0.0001090509 0.0008345122 -0.0005727654 -0.0004451596 0.0051680695 0.0015385944 0.0024481269 -0.0016379195 0.0021582156 -0.0007855943 -0.0028886573 0.0006602675 -0.0013697402 0.0002429237 -0.0019463837 -0.0000700932 0.0070484328 -0.0004884454 0.0032302722 -0.0018410874 -0.0009161977 -0.0013359616 -0.0004955410 0.0005354386 -0.0000995765 0.0001837103 0.0012322522 0.0021526198 0.0008650171 -0.0009262094 -0.0008702004 0.0010667800 0.0014412366 -0.0039009111 0.0223084119 0.0544299712 0.0156965682 0.2380082767 0.1206411490 -0.2275510500 -0.0777975327 -0.1161745333 -0.0394530595 -0.0731378979 -0.1228678427 -0.0590892644 0.0771848466 0.0731569051 -0.0241107004 -0.0450579451 0.0601455056 0.1672305956 0.0726253871 0.0542848143 -0.0514647811 0.0145561852 0.0792218455 0.1183313056 0.0174353735 -0.0912556300 -0.1541204809 0.2072336214 -0.0924249609 -0.5025456797 0.0022536768 -0.1491667548 -0.1929248600 0.0310800013 0.0233054385 0.0149768993 -0.0258448315 -0.0010199668 0.0084993480 -0.0261042014 0.0162377215 -0.0358932124 0.0182854722 0.0112140887 0.0082115016 0.0164055982 0.0129154484 0.0062745289 0.0045910142 -0.0015605670 -0.0204360994 -0.0119857156 -0.0066909490 0.0058338153 0.0036335644 -0.0025689558 -0.0211439328 -0.0133652380 -0.0078642064 0.0051165990 -0.0331552167 -0.0079060695 0.0668555139 -0.0077134455 -0.0027528959 0.0183143689 -0.0312386918 -0.0072104995 0.0595709598 -0.0067282842 0.0001839468 0.0233617480 -0.0513649599 -0.0307057353 0.0208251010 -0.0000895180 -0.0096088051 -0.0452087784 -0.3282183754 -0.4118218888 0.2008680617 0.0009602405 0.0000852404 0.0007680664 -0.0064980391 -0.0017056166 0.0035116264 0.0177563592 0.0128650252 0.0028238065 -0.0030940682 -0.0062707516 -0.0046623420 -0.0001019692 -0.0003951649 -0.0002206088 0.0001541294 0.0003080084 0.0000404106 0.0002908562 0.0001876102 0.0000469214 -0.0000802291 0.0002468136 0.0001445681 -0.0089620422 -0.0029575667 0.0029169381 -0.0050771572 0.0015687550 0.0049809921 0.0008689291 -0.0001713555 0.0011189403 -0.0013869622 0.0005485281 -0.0026900631 -0.0006535164 0.0011746694 0.0012964966 -0.0018230805 -0.0001026115 -0.0033646863 -0.0015723613 0.0033226382 0.0009796253 0.0011617922 -0.0000882589 0.0034199996 -0.0027638349 0.0004880148 0.0019857842 0.0010967959 0.0018374028 -0.0024133472 0.0031126163 0.0007215261 0.0004837329 0.0340392564 0.0089787672 -0.0265152242 0.0333503021 -0.0018212903 -0.0163511903 0.0211246021 -0.0330583945 -0.0421043762 -0.0001090739 -0.0003013205 -0.0002132599 0.0001345137 0.0001127101 0.0001554174 -0.0000534974 -0.0003464919 0.0002138429 -0.0008036920 -0.0001933167 -0.0000397373 0.0011094734 0.0006321021 0.0002726969 -0.0006772844 -0.0001558212 0.0002660562 -0.0009869009 0.0009583436 -0.0009670581 0.0015713775 0.0012688194 -0.0029855904 0.0023130438 0.0004524403 -0.0013401945 -0.0008659015 -0.0004614007 -0.0002267094 -0.0006126095 -0.0002985705 0.0002187135 -0.0007277477 0.0007852272 0.0004437851 -0.0008392980 -0.0001340489 -0.0014033624 0.0016428731 -0.0006782204 0.0009148592 -0.0009484578 0.0009177537 0.0005011828 -0.0005040570 -0.0002571014 -0.0009086393 0.0033768146 -0.0030987634 -0.0011693419 0.0029663743 -0.0013830011 0.0015824362 -0.0018124444 0.0009694242 -0.0002686817 0.0025587296 -0.0021442007 -0.0009240090 0.0034490668 0.0001007793 0.0006639509 -0.0007853829 -0.0000219008 0.0016103585 -0.0009200224 -0.0002753761 -0.0003365277 0.0005099364 -0.0000852364 0.0007991804 0.0006860851 -0.0005597179 -0.0007261030 0.0005243486 0.0000807818 -0.0002809705 -0.0002094568 0.0000238698 0.0001202593 -0.0003373360 0.0002185489 0.0002084639 -0.0001444345 -0.0003194859 0.0000550253 0.0011589457 -0.0001137959 -0.0006683126 0.0008776091 0.0009158041 -0.0004292982 -0.0003668203 0.0001615455 0.0002546929 0.0003274520 -0.0000018037 -0.0002002265 0.0011493516 -0.0001977211 -0.0007923581 0.0003787455 0.0000736116 -0.0002123064 -0.0022523046 0.0007879306 -0.0013579028 0.0020899130 -0.0007023262 0.0010887219 0.0014100178 -0.0014724630 0.0009701924 0.0012981236 0.0024003518 0.0005607108 -0.0057445863 -0.0010926379 -0.0036803895 -0.0050292909 -0.0072738889 -0.0022983921 0.0013547011 -0.0007609327 0.0007943696 -0.0017559316 0.0000141564 -0.0009874338 -0.0029522264 -0.0005858145 -0.0015876625 -0.0011124153 -0.0026682301 -0.0004787933 -0.0001595576 0.0021626268 -0.0013760095 0.0221293849 -0.0242056524 0.0078332553 0.0160099000 0.0118959043 0.0020258981 -0.0195053785 -0.0204510017 -0.0027668018 0.0063137042 0.0012079974 -0.0000410727 0.0039399614 0.0017201619 0.0004316175 -0.0313858742 0.0190889729 0.0101961118 -0.0281644218 -0.0165393588 -0.0220338805 0.0006264191 0.0001658157 -0.0002766531 0.0011796574 -0.0001517848 -0.0003990014 -0.0006237250 0.0002198184 0.0002889684 -0.0005140459 -0.0003791741 0.0001732537 0.0010071652 -0.0007331585 -0.0003669648 0.0008865683 0.0001987240 0.0006325811 0.0002720969 0.0004892473 0.0000743938 -0.0006856571 0.0000476723 -0.0003588970 -0.0002982981 0.0002279703 -0.0001030487 0.0011215627 -0.0001529658 0.0006443505 -0.0007075915 -0.0006375715 -0.0005918842 -0.0005409719 0.0001448264 -0.0003301987 0.0000299976 0.0035419330 0.0030648884 0.0028258599 -0.0030860795 -0.0028843901 -0.0019997982 -0.0036481835 -0.0032039563 -0.1603397229 0.1344137054 0.2428005141 -0.0224397377 -0.0126740704 0.0184959365 -0.0008083633 0.0035166615 0.0064652215 -0.0005463283 0.0027371883 -0.0099000797 0.0049858994 0.0093114454 0.0062590488 0.0038171031 -0.0166605095 -0.0306446248 0.0055054931 0.0220340814 0.0228551069 -0.0314368515 -0.0331327677 0.0004388930 -0.0171719159 -0.0290945152 -0.0201717134 -0.0224329568 -0.0028511460 0.0371613456 -0.0230843988 -0.0339954033 -0.0127820522 0.0013529185 -0.0121180971 -0.0166953915 0.0214932697 -0.0162243851 -0.0542194824 0.0056017854 -0.0164396324 -0.0063037331 0.0010873105 0.0481325805 0.1641219242 -0.0025865385 0.0242028929 0.1073256943 0.0839032389 0.0388164932 -0.0787090867 -0.0860304744 -0.0728891213 -0.0454319114 0.0890345872 0.0295635935 -0.1329292374 -0.0909482323 -0.0882918233 -0.0987580484 -0.1166337345 0.0261011754 0.4083201107 0.1083327988 0.1593170520 0.3441740073 -0.1266440606 0.0128181339 0.4029493446 0.1594431211 0.1990392168 0.3719870521 0.0102383654 0.0382106335 0.1296666629 0.0096237196 0.0106916324 0.0048899050 0.0788665408 0.0933070268 -0.0427863007 0.0010548350 -0.0006643154 0.0004049999 -0.0075122204 0.0034235688 0.0050280643 0.0106282791 0.0048872656 -0.0042617867 -0.0012743695 -0.0030586733 -0.0015432482 0.0001303942 0.0002188249 -0.0000649686 -0.0000700344 -0.0001153796 -0.0000708200 0.0003088996 0.0002717560 -0.0005698354 -0.0000894587 -0.0000471995 -0.0001700599 -0.0039578821 -0.0013435488 0.0019476820 -0.0028629860 0.0016068132 0.0030884062 0.0014376046 0.0011892683 0.0010682620 0.0000769368 -0.0000105148 -0.0012596517 -0.0008770181 0.0011431261 0.0010767879 -0.0034150254 -0.0076339129 0.0037331207 0.0032666428 0.0011893111 -0.0002776346 -0.0045923498 0.0016243474 0.0051600724 -0.0000263378 -0.0004772819 0.0020286455 0.0001579486 -0.0000157461 -0.0005861562 0.0006669942 0.0020427563 0.0010677696 0.0122226154 0.0020100217 -0.0245740914 0.0172384251 -0.0138951297 -0.0089911010 0.0083543175 -0.0139384371 -0.0137742586 -0.0002617370 -0.0001450354 0.0001927044 0.0005643606 0.0002216467 -0.0001158254 -0.0004683304 -0.0001145239 0.0002028823 -0.0002289601 -0.0002455822 0.0000413823 0.0010322166 0.0004346031 -0.0004176812 -0.0009283036 -0.0002240118 0.0005066539 -0.0012844683 -0.0019030536 -0.0000805672 -0.0000010207 0.0004937348 -0.0008384500 0.0001474508 0.0000455673 0.0000142395 -0.0000317565 -0.0016710251 -0.0001417356 0.0009327700 -0.0003526338 -0.0011100435 -0.0003404433 0.0005631995 0.0005558650 -0.0008662103 0.0001005344 -0.0010228329 0.0009949640 -0.0005494052 0.0003053167 -0.0007684918 0.0008412665 0.0005888822 -0.0004302869 -0.0000765193 -0.0008204467 0.0023859119 -0.0021555927 -0.0004031936 0.0027109235 -0.0010009617 0.0017919279 0.0001166061 -0.0000924965 -0.0001030930 0.0024193324 -0.0018678698 -0.0007173009 0.0026426673 -0.0010526837 0.0015273085 -0.0000286556 0.0000480803 -0.0001280855 -0.0000064630 0.0000003747 0.0000308815 -0.0000820964 0.0000106293 -0.0001294505 -0.0001270653 0.0001177752 0.0001711171 0.0001465772 0.0001211952 -0.0000526189 -0.0003614448 -0.0000044476 0.0002226344 0.0003649633 -0.0001554164 -0.0002253942 -0.0001171122 0.0003537741 0.0000990311 -0.0009070711 0.0001510771 0.0005366061 -0.0005877313 -0.0001512411 0.0003380007 0.0004039621 0.0001364522 -0.0002376215 -0.0000375028 -0.0005302851 -0.0000254721 -0.0010970055 0.0005537354 0.0008840210 -0.0005258959 0.0012793188 0.0004224197 -0.0008802040 0.0000836911 -0.0005239914 0.0006888145 -0.0000913329 0.0003638204 0.0001452758 -0.0004473512 0.0001224700 0.0005505872 0.0006904320 0.0002624350 -0.0011531335 -0.0004191273 -0.0007857832 -0.0012306259 -0.0020723199 -0.0005061386 0.0002481152 -0.0002506386 0.0001513565 -0.0004924113 0.0000875893 -0.0002856244 -0.0004939949 -0.0002586159 -0.0002468554 -0.0001357120 -0.0011444181 0.0000156190 0.0014945542 -0.0003924269 -0.0010319079 0.0027027052 -0.0021425790 -0.0011061981 -0.0030860805 0.0045359052 0.0070133353 -0.0051372671 -0.0101368229 0.0020848110 0.0022696381 -0.0019360570 0.0009551003 0.0110639131 0.0089253245 0.0085878687 -0.0202668036 0.0289677084 -0.0041311751 -0.0132199298 -0.0075320419 -0.0180213732 -0.0079358473 -0.0218353951 -0.0008833514 0.0046449379 0.0073128408 -0.0038237974 -0.0057870500 0.0087598778 0.0042644956 0.0049641296 0.0033293759 -0.0082865447 -0.0041828731 0.0100603972 0.0042984506 -0.0434519776 -0.0036924003 -0.0212344850 0.0560808647 -0.0295121377 0.0298395018 -0.0063032698 0.0086001528 -0.0056220440 -0.0712008586 0.0632808114 -0.0229320513 -0.0175529380 0.0142776677 0.0053684848 0.0075586992 0.0056651329 0.0043841748 0.0011446826 -0.0020801693 -0.0006119895 0.0028833296 -0.0000090454 -0.0010808998 -0.0018416928 0.0023163206 0.0016012663 -0.0018146180 -0.0016013783 -0.0006916298 -0.0043495673 0.0035929149 0.0036004080 -0.0025746825 -0.0021409650 0.0012432812 0.0003528576 0.0002108320 -0.0003113984 0.0011968126 -0.0002688776 -0.0022233937 0.0004766331 0.0012738291 0.0011223825 -0.0002893538 -0.0011087149 -0.0011675882 0.0004590413 0.0016733770 0.0016811913 -0.0024579283 -0.0025369398 -0.0001736426 -0.0020256177 -0.0035619247 -0.0021231898 -0.0010725471 -0.0009424199 0.0010253808 -0.0030291799 -0.0043452215 -0.0026655981 -0.0001957178 0.0000943977 0.0003463430 0.0004510151 0.0003045070 0.0011490210 0.0014654678 0.0002887185 -0.0012561781 -0.0001523723 -0.0006450889 -0.0022083798 -0.0002462882 -0.0004787941 -0.0012293565 -0.0010155238 -0.0005085778 0.0009655814 0.0011206316 0.0009760429 0.0004863222 -0.0009813003 -0.0002723298 0.0015761039 0.0012026800 0.0011441946 0.0012353368 0.0013148085 -0.0002563429 -0.0048828517 -0.0010170843 -0.0020687553 -0.0039731871 0.0019045432 -0.0002101238 -0.0052012605 -0.0018086767 -0.0023109310 -0.0044579142 0.0003357438 -0.0001463841 -0.0016494022 0.0005326558 0.0006014728 0.0008635518 0.0077891925 0.0090999303 -0.0061354471 0.1530204675 -0.1082223006 0.0432802614 0.0008420269 -0.0001024946 -0.0012364541 -0.0011638827 -0.0001042588 0.0006981208 0.0001496436 0.0002784396 0.0000958220 0.0000019455 -0.0001170499 0.0000120275 0.0002540124 0.0002091204 0.0000920125 0.0000284694 -0.0003209082 -0.0000379306 -0.0000009134 0.0000175187 -0.0000128586 0.0003183896 0.0000605456 -0.0001673214 0.0002803079 -0.0000725612 -0.0002473033 -0.0015864400 -0.0029502972 -0.0003708567 -0.0023533427 0.0003111678 0.0007424286 0.0008078633 0.0005604156 -0.0015100629 -0.0001983879 0.0008376553 -0.0018115287 -0.0011163086 0.0026521097 0.0008835916 0.0004777403 -0.0001714145 0.0020784755 -0.0002532809 0.0000894023 -0.0000997062 -0.0000161383 0.0002211770 -0.0000004833 0.0001705697 -0.0002053015 -0.0001133090 -0.0012575786 -0.0002920513 0.0015918513 -0.0014300735 0.0006437310 0.0007541986 -0.0006289629 0.0011942431 0.0012205494 0.0330716205 0.0135396834 -0.0087251028 -0.0123331958 -0.0142045147 -0.0144863518 -0.0224418519 0.0042993195 0.0252975324 0.0312768548 0.0107788958 -0.0040483540 -0.0241375807 -0.0197766865 -0.0161162344 -0.0143190306 0.0054999619 0.0232317119 0.0724364897 0.0351334619 0.0015452352 0.0753230756 0.0003217493 -0.0548835388 -0.0017529634 -0.0005241192 0.0015478273 0.0767575034 0.0383664035 0.0067848052 0.0811611183 0.0090339108 -0.0578740620 -0.0435409909 0.0759254230 0.0791213631 -0.1172120061 0.0178535404 -0.1295032432 0.1373293085 -0.0824635217 0.0280480796 -0.1017277395 0.1177465486 0.0824446886 -0.0598878804 -0.0077042812 -0.1088164986 0.3164063765 -0.2643508459 -0.0495384614 0.3419936233 -0.1243952711 0.2363225790 -0.0015164077 0.0002404831 -0.0019758459 0.3194041369 -0.2797731684 -0.0847668416 0.3469497950 -0.1577633202 0.2164743726 -0.0004804456 0.0001023220 0.0012435051 -0.0022202501 -0.0008303514 -0.0020019000 -0.0068391517 0.0008656488 -0.0129645721 -0.0086673203 0.0084515153 0.0114972077 -0.0018235491 -0.0034235140 0.0007954743 -0.0138688714 0.0067378056 0.0096199949 0.0090953237 -0.0047259351 -0.0056338668 -0.0003520971 0.0145281419 0.0015406928 -0.0303235371 0.0049277351 0.0177689248 -0.0187874399 -0.0053950186 0.0103930415 0.0111492457 0.0064019950 -0.0064735169 0.0001567426 -0.0216957692 -0.0020322268 -0.0368523593 0.0200349543 0.0268930934 -0.0173346338 0.0436821700 0.0141444209 -0.0319622522 -0.0006381410 -0.0182970186 0.0530783152 -0.0002352551 0.0278440402 -0.0204526157 -0.0075783339 -0.0116776978 0.0257887233 -0.0045471841 0.0153624070 0.0314774538 -0.0165048393 0.0208352104 -0.0002125089 -0.0537322644 0.0045180621 -0.0155291575 -0.0246508915 -0.0070373014 -0.0207582994 0.0453459239 -0.0146732383 0.0538151090 -0.0384006295 0.0309827995 0.0411019603 -0.1252956651 0.0312218257 0.0000042667 0.0000366119 0.0000891042 -0.0005365994 -0.0001645375 -0.0016210842 -0.0013368381 0.0007787857 0.0015521350 0.0007025796 -0.0008247099 0.0021624574 -0.0004459235 0.0000075170 0.0000084365 -0.0021215725 -0.0000497744 0.0004746784 0.0036096515 -0.0019972983 -0.0010285478 0.0019882042 0.0003044494 0.0035869095 0.0828360490 0.0185676195 -0.0297124599 0.0238770224 0.0167667170 0.0060605937 0.0082736908 0.0144381195 -0.0046242298 -0.0567171916 -0.0186987804 0.0240785648 0.0420958918 -0.0021307340 -0.0190658940 -0.0077594631 0.0134311695 -0.0024862770 0.0128605683 -0.0061748755 0.0012933516 0.0047842288 0.0128643702 0.0019232378 -0.0249048558 -0.0080052719 -0.0111866880 -0.0033256155 0.0164993410 0.0015531570 0.0007625648 0.0000716925 0.0006785928 -0.0048429183 0.0061769284 0.0034048751 -0.0016009951 0.0007148415 -0.0012172949 0.0009246203 -0.0009550342 -0.0001507553 0.0012906840 0.0014433157 0.0012689240 0.0009160319 -0.0029381393 0.0005334397 0.0026616933 0.0025413775 -0.0006992767 -0.0006121640 -0.0001569157 0.0009021600 -0.0010338167 0.0010090267 0.0027928298 -0.0007066888 -0.0014316319 -0.0010826751 0.0009940403 0.0010055825 -0.0000192373 -0.0011585691 -0.0022398182 -0.0014935563 0.0027419485 0.0024654408 -0.0006932476 0.0024505235 0.0045108771 0.0031304990 -0.0000523005 0.0021123256 0.0018376915 0.0053038345 0.0046152741 0.0058437547 0.0008256590 -0.0005815132 -0.0012018281 -0.0008224959 -0.0000476193 0.0008335033 0.0004724903 -0.0004800190 -0.0025151224 0.0005660505 0.0002782935 -0.0000495728 0.0005081787 0.0003554111 -0.0002492294 -0.0000776983 0.0001313344 0.0001339745 -0.0002507137 -0.0003263206 -0.0002493307 -0.0003037038 -0.0001170031 0.0005379485 -0.0002252526 -0.0001922342 -0.0001527191 0.0000086665 -0.0000183853 0.0002541281 -0.0004550741 -0.0004251968 -0.0008623598 -0.0001238318 -0.0000659648 -0.0000743960 -0.0000327659 -0.0000670961 0.0001897488 -0.0008165502 -0.0005432130 -0.0000452950 -0.0008214183 -0.0008463990 -0.0003445379 -0.0019184847 -0.0044658720 0.0024780709 0.0257378991 -0.0149509353 0.0088684987 0.0008960527 -0.0002663554 -0.0015087814 -0.0009678900 0.0006244665 0.0014582013 0.0000236723 -0.0001083362 -0.0002364125 -0.0000626838 -0.0001179277 -0.0000232052 0.0000929635 0.0001034504 0.0000074421 0.0001106440 -0.0000531214 0.0001194369 0.0000361839 0.0000507623 0.0000147184 0.0001911725 -0.0000450705 -0.0002023597 0.0001928645 -0.0000061362 -0.0001184750 -0.0004034142 -0.0008296178 -0.0000878366 -0.0006885707 0.0001328783 0.0002058503 0.0001796682 0.0000073071 -0.0002073811 -0.0004463692 0.0005522062 -0.0018855324 -0.0011575236 0.0010155721 0.0004115709 0.0003871533 -0.0000799166 0.0003920769 -0.0001722451 0.0000785105 0.0000692968 0.0000761482 -0.0000987814 -0.0001013051 0.0000094158 -0.0001468195 -0.0000919353 -0.0007277814 -0.0001006238 0.0011262524 -0.0006927021 0.0006279692 0.0004472251 -0.0001742393 0.0005784396 0.0001758901 -0.1688237190 -0.0555033218 0.0529590421 0.0673741983 0.0690843893 0.0670880269 0.1056923534 -0.0254067448 -0.1274131415 -0.1496062933 -0.0424323506 0.0364956948 0.1231873109 0.0927871976 0.0681272097 0.0551786380 -0.0313490438 -0.1066012064 -0.3662194955 -0.1755682581 -0.0198385243 -0.3597250817 -0.0062680268 0.2510505239 0.0097167576 0.0021560757 -0.0047139529 -0.3691762986 -0.1910929763 -0.0466419439 -0.3668332343 -0.0441411369 0.2442241216 -0.0085067142 0.0124761081 0.0118022104 -0.0178596681 0.0016536750 -0.0214613465 0.0216212490 -0.0109542658 0.0084335639 -0.0171063658 0.0180631917 0.0106871570 -0.0067847335 -0.0029877589 -0.0158865341 0.0522136260 -0.0427830830 -0.0106783864 0.0522997501 -0.0199386402 0.0336751014 -0.0006416555 0.0003197723 0.0003638342 0.0488524722 -0.0441390230 -0.0161202930 0.0489709373 -0.0224748410 0.0267241058 0.0033283232 -0.0003317226 -0.0083819670 0.0082317369 0.0033005966 0.0077237814 -0.0012763492 0.0001847467 -0.0024526743 -0.0007929472 0.0008481454 0.0011792867 -0.0572936616 0.0125998121 0.0316145278 0.0140339340 -0.0005634998 -0.0074774951 0.0161246063 -0.0349855288 -0.0124752959 0.0356828688 0.0536580763 -0.0153393158 -0.0975833584 -0.0149611740 0.0524356032 -0.1007213352 -0.1147783120 0.0467113036 0.0294142493 -0.0079396581 -0.0187996488 -0.0262066022 -0.0192705583 0.0138427167 -0.0749689869 0.0157225297 0.0496737795 -0.0356832030 -0.0071078176 0.0206054260 0.0096244235 0.0032444657 0.0060729176 0.0230418980 -0.0073449242 0.0124243810 -0.0198205969 0.0099627042 -0.0130526084 0.0006670376 -0.0285977110 0.0026615252 0.0697134509 0.0019938705 0.0463197252 0.0401502053 0.0262703736 0.0210999114 -0.0198671445 -0.0109391439 -0.0103694625 -0.0011636461 0.0347422377 -0.0029956149 0.0616120272 -0.0214426162 0.0351333697 0.0365768270 -0.0613175247 0.0247681369 0.0000455782 0.0000108091 0.0002075943 -0.0006790875 0.0001907710 -0.0013254515 -0.0009014930 0.0003419202 0.0010109467 0.0007874928 -0.0001040966 0.0014234119 -0.0000731615 -0.0001550740 0.0003036320 0.0003903207 0.0002142408 0.0004836181 -0.0008569047 0.0019012997 -0.0004943670 -0.0016245406 -0.0006780070 -0.0015753944 -0.0031493286 -0.0006369845 0.0012639170 -0.0038248470 0.0002676255 0.0012607358 0.0020111147 -0.0008469062 -0.0009692349 0.0019642398 0.0036738628 -0.0003203168 -0.0034204645 0.0019930363 0.0016443026 -0.0041068064 0.0037503054 -0.0022882550 -0.0014755875 -0.0064599774 -0.0005637595 0.0026212227 0.0023262103 0.0012444665 -0.0039827179 -0.0031866117 -0.0020401786 -0.0019797200 0.0033083037 -0.0004377574 0.0027540661 0.0012650776 0.0007962369 0.0021318487 -0.0015317309 0.0004668783 -0.0019727668 -0.0044261585 -0.0036928686 -0.0014511787 0.0035199629 0.0025692292 0.0051811693 0.0081158378 0.0085677508 0.1273447471 -0.1116390916 -0.2002027672 0.2419384905 0.2270817617 -0.0765337359 -0.0786922999 -0.0336437963 0.0857516083 -0.0479623089 0.0596773948 0.1525018471 -0.0340656777 -0.1079902206 -0.1021498527 0.0743079752 0.0812438640 -0.0100483687 -0.0712425031 -0.1582099689 -0.1022974664 0.1794378627 0.1944447258 -0.0076200206 0.1959267596 0.3450744018 0.2024708321 0.0415368982 0.1310163775 0.1152767735 0.1780950369 0.4165513083 0.2526438506 0.0141606420 -0.0090505218 -0.0263827356 -0.0080160671 -0.0194240092 -0.0289090594 -0.0666362301 0.0304343926 0.0477283883 -0.0005984791 0.0112443151 0.0369018084 0.0021649056 0.0067212454 0.0214177532 0.0140572707 0.0075251842 -0.0084566825 -0.0138898718 -0.0107109106 -0.0027154054 0.0156205743 0.0034391927 -0.0297630840 -0.0179998514 -0.0188267169 -0.0246681117 -0.0155472571 0.0076602410 0.0617338181 0.0155508747 0.0313097040 0.0643630956 -0.0261020328 0.0000998909 0.0727196518 0.0311118977 0.0375324541 0.0671749323 -0.0012588151 0.0060988931 0.0267606192 -0.0605853341 -0.0652136234 -0.0115097753 -0.1424384464 -0.2140518079 0.0846982416 0.0018616402 -0.0009048119 0.0006870593 0.0052987244 -0.0008453919 -0.0108762164 -0.0043441651 0.0093320626 0.0136871402 -0.0011115573 -0.0044718733 -0.0041112890 -0.0000006823 -0.0004391941 -0.0002959103 0.0002444102 0.0004891748 -0.0001122005 0.0002053680 0.0000317478 0.0000178230 -0.0000488139 0.0003663116 0.0001324691 -0.0001066095 -0.0010674783 -0.0011323251 0.0009917551 -0.0000006247 -0.0007241332 0.0003051701 -0.0031623134 0.0017686506 -0.0030110249 0.0006487610 -0.0006995708 -0.0004040944 0.0010962133 0.0010174362 -0.0015257809 0.0004701095 -0.0027271042 -0.0010800385 0.0038687750 0.0010978028 0.0018609540 -0.0004404184 0.0034131780 -0.0005388747 0.0002398024 0.0011375919 0.0002674036 -0.0006520419 -0.0005461329 0.0002917381 0.0000497738 -0.0000383615 0.0003571268 0.0014667781 0.0094587697 -0.0041254623 0.0087619842 0.0035846206 0.0021454192 -0.0006132284 -0.0030188949 0.0031639785 0.0011336782 -0.0013468823 -0.0014621875 -0.0014811026 -0.0012316296 -0.0019547883 0.0009780686 0.0027464482 0.0030488636 0.0010955028 -0.0002693202 -0.0059063107 -0.0034898987 -0.0015066742 0.0019444865 0.0012621820 0.0008114814 0.0130830525 0.0082257176 0.0013862299 0.0053560752 -0.0013378628 -0.0011851151 0.0021787505 0.0005856321 -0.0001565557 0.0101215186 0.0052809960 0.0028153084 0.0061367608 0.0022497808 -0.0027900450 -0.0009585596 0.0010424506 0.0007202671 -0.0008081649 -0.0001439765 -0.0013552903 0.0011007963 -0.0002583008 0.0010393967 -0.0010810817 0.0010038814 0.0003102779 -0.0000020383 -0.0003882812 -0.0008166392 0.0036400241 -0.0030071119 -0.0011111631 0.0026817031 -0.0013807305 0.0014225746 0.0005675538 -0.0003286207 0.0004025919 0.0028411957 -0.0035425354 -0.0013216249 0.0014531994 -0.0017586739 0.0008424198 -0.0006593404 0.0000652745 0.0012668456 -0.0012873374 -0.0007109330 -0.0012394855 -0.0003556680 0.0001030781 -0.0006395513 -0.0001984145 0.0002074664 0.0001921643 0.0000005904 -0.0009814188 -0.0001395897 0.0014983674 -0.0002895690 -0.0010355227 -0.0009203868 0.0012079342 0.0006521148 -0.0004711467 -0.0023711020 0.0000426874 0.0035095593 0.0003237609 -0.0019063895 0.0033298028 0.0021295409 -0.0017270511 -0.0011536382 -0.0008393270 0.0006220158 0.0000340103 0.0028227529 0.0002447282 0.0034096003 -0.0021562919 -0.0026983947 0.0020112812 -0.0045838528 -0.0016298022 0.0059501291 0.0003929860 0.0035665706 0.0026794951 -0.0002831730 0.0014149139 -0.0032873315 0.0037262541 -0.0022883080 -0.0025603131 -0.0084769565 -0.0008189789 0.0148421019 0.0026107282 0.0095727086 0.0112851443 0.0119576706 0.0054489352 -0.0043437744 -0.0020101687 -0.0023015239 0.0010824329 0.0072299670 0.0001290430 0.0120133046 -0.0039416409 0.0068224114 0.0075704570 -0.0084824831 0.0048270633 -0.0004082152 -0.0018616666 0.0047976460 -0.0075539129 0.0090743582 0.0034298844 0.0141631738 -0.0086932995 -0.0118532721 0.0075816329 0.0249775206 -0.0166869152 0.0016636547 -0.0026589525 0.0004477937 -0.0070384328 0.0120660111 0.0163427711 -0.0081129536 0.0210290950 -0.0078676396 -0.0162915342 -0.0145852574 0.0010424032 -0.0223310062 -0.1506940983 -0.0195535913 -0.0712876790 0.0854356646 0.0429253825 0.0247484513 0.0579445567 -0.0033761503 0.0498805888 -0.0792330378 -0.0291390777 0.0288686916 0.1298350709 0.0017872070 0.0081975187 0.1301797060 0.0041896010 -0.0656282029 -0.0574979248 -0.0257666253 -0.0058087492 0.0626180908 -0.0012522941 -0.0290617690 -0.1421283190 -0.0269214512 0.0904485731 0.0579518098 0.0449065426 -0.0014185497 -0.0076533329 -0.0033326941 -0.0005723868 -0.0091076871 -0.0034536756 -0.0002234964 -0.0033039245 0.0040684857 0.0003157506 0.0005794556 -0.0013409935 -0.0006163826 -0.0000657633 -0.0018275903 0.0009354634 0.0005933817 -0.0013343539 -0.0064715931 -0.0063590134 0.0015337851 0.0023951206 0.0008752893 -0.0028609362 0.0010073046 -0.0019368761 -0.0038512810 0.0009267709 0.0029164439 0.0027656868 -0.0025161689 -0.0018631581 0.0015650354 0.0022358847 0.0041092282 0.0021692612 -0.0043088471 -0.0047012628 0.0004892279 -0.0054094389 -0.0094745426 -0.0056865118 -0.0002054319 -0.0041180398 -0.0054249232 -0.0052338178 -0.0110200086 -0.0080614522 -0.0004129549 0.0006089207 0.0013447439 -0.0000530234 0.0004203469 -0.0000476869 -0.0000276249 -0.0001342073 0.0009035023 -0.0001832744 -0.0003149536 -0.0003297274 -0.0001196503 -0.0001291290 -0.0001483595 -0.0000718365 -0.0000482126 0.0001152488 0.0001716362 0.0002101251 0.0000104326 -0.0000585169 0.0000399698 0.0001815457 0.0001346569 0.0001515675 0.0001316048 0.0001106268 0.0000336712 -0.0003675818 0.0008169785 -0.0002606932 0.0004593183 0.0005070447 -0.0000902222 -0.0007482690 -0.0001315828 -0.0003832227 -0.0005010630 0.0002788964 0.0001124014 -0.0002485724 0.0017921358 0.0018734169 -0.0000606361 -0.0037873780 -0.0008317536 0.0014690587 -0.0216994150 0.0340552373 0.0012341947 -0.0011851297 0.0002715998 0.0019706624 0.0012249915 -0.0007698261 -0.0017406980 -0.0000417313 0.0001352707 0.0002382522 0.0000928867 0.0001424536 0.0000952343 -0.0000608652 0.0000573509 -0.0000857048 -0.0002635883 0.0000330353 0.0001006809 -0.0000384079 -0.0000426785 -0.0000275442 -0.0001914106 0.0000606240 0.0002141035 -0.0002588741 0.0000374484 0.0002201649 -0.0005637405 -0.0007242666 -0.0002766296 0.0004030939 -0.0000876898 0.0014247868 0.0004121040 -0.0007184865 -0.0006331983 0.0014637424 0.0013180207 0.0012475394 0.0000907829 -0.0021085475 -0.0006157780 0.0009889331 -0.0003502022 -0.0028485847 0.0002098312 -0.0000334360 -0.0002685706 -0.0001487935 0.0001298304 0.0002739601 -0.0000500636 -0.0000810913 -0.0000599236 0.0006813818 0.0000281558 -0.0017693124 0.0012500704 -0.0011274210 -0.0007629051 0.0001146961 -0.0005798621 -0.0004288657 0.0428294610 0.0321740991 -0.0045186054 0.0042610918 -0.0094649261 -0.0174942792 -0.0320183147 -0.0041789788 0.0188571493 0.0368103310 0.0249557087 0.0183549564 -0.0266173679 -0.0271517479 -0.0265322491 -0.0233815820 0.0016302457 0.0281354476 0.0448258145 0.0186549572 -0.0161479353 0.0732513403 -0.0077347658 -0.0729873275 -0.0024501932 -0.0015506444 0.0060709956 0.0797813512 0.0346581176 -0.0051021115 0.1011666762 0.0125321336 -0.0866658041 -0.0087144892 -0.0018466323 -0.0125626937 0.0217330792 -0.0119509365 0.0092298111 -0.0190463172 0.0238972307 0.0209083935 0.0122360894 -0.0213798808 -0.0225759876 0.0173672766 -0.0065668647 0.0192505324 -0.0196322455 0.0163245681 -0.0139930580 -0.0464417718 0.0099437190 -0.0502173059 0.0011125377 -0.0001597893 0.0050770028 -0.0463090019 0.0352574413 -0.0022884693 -0.0661302785 0.0325666156 -0.0586643549 0.0016334499 0.0003854141 -0.0033488178 -0.0043688535 -0.0013975846 -0.0037796902 -0.0016419884 0.0004344669 -0.0028618534 0.0031094263 -0.0027729809 -0.0038043137 -0.0791137465 -0.0143302285 0.0394285704 -0.1022639974 0.0623084825 0.0665192385 0.0636086983 -0.0573264618 -0.0416402986 0.0258407022 0.1259416211 -0.0028612198 -0.2383416848 0.0102380288 0.1333395168 -0.1719141451 -0.1015134482 0.0891409889 0.0796644108 0.0382608847 -0.0455069099 -0.0084149085 -0.1498445153 -0.0084059805 -0.2403975260 0.1292839611 0.1718615098 -0.1187749960 0.2479375999 0.0902787786 0.1116600925 0.0244035744 0.0631564249 0.0731732206 -0.0402633736 0.0386256414 -0.0658129085 0.0609921106 -0.0448880754 -0.0361274386 -0.1416727444 -0.0097863444 0.2765901408 0.0384988537 0.1798164825 0.1901211923 0.1885102414 0.0927066674 -0.0792855760 -0.0328420682 -0.0421280848 0.0146136455 0.1266735463 -0.0002038454 0.2310024469 -0.0688823038 0.1300648894 0.1315371127 -0.1565434255 0.0846074049 -0.0000054497 0.0000362905 -0.0003000796 0.0008187752 -0.0001129952 0.0016293234 0.0008244011 -0.0006246427 -0.0013158461 -0.0010584100 -0.0000057234 -0.0017576006 0.0003060540 0.0002229827 -0.0002163822 0.0009848250 -0.0008827720 -0.0013911291 -0.0016625673 -0.0010947608 0.0015760497 0.0003878916 0.0008717998 -0.0014005996 0.0176434495 -0.1130962147 -0.0282428079 -0.0272656300 0.0618799392 0.0230921911 0.0003070201 0.0484078452 0.0061187287 0.0172408631 -0.1475092803 -0.0353939294 0.0296176779 0.1076713020 -0.0022564263 -0.0021930809 -0.1117126331 -0.0001311798 0.0587884609 0.1352780822 0.0350665311 -0.0171720969 -0.0471716974 -0.0087029856 0.0580934438 0.0986240867 0.0344948543 -0.0412721065 -0.0520922570 -0.0248068157 0.0017916307 0.0079303082 0.0010201897 -0.0003654857 -0.0090835152 -0.0010478377 0.0035326856 -0.0005831479 0.0000530100 -0.0020081022 0.0025049925 0.0015315811 -0.0020939726 -0.0019326546 -0.0015336459 0.0024190565 -0.0021077996 -0.0082103254 0.0109858644 0.0104071930 -0.0033441125 -0.0044379057 -0.0021504160 0.0044525355 -0.0011469602 0.0032452608 0.0059977625 -0.0009731190 -0.0040709215 -0.0043495513 0.0039023202 0.0033571472 -0.0018424097 -0.0035118747 -0.0070247268 -0.0037908423 0.0071608195 0.0080553972 -0.0002931183 0.0084611617 0.0145294968 0.0080482784 0.0013447061 0.0062737146 0.0069376151 0.0067177185 0.0176976363 0.0112604359 0.0012509077 -0.0006654314 -0.0014221109 -0.0006691753 -0.0005056165 0.0000620937 -0.0019914900 0.0016672496 0.0002057406 -0.0001820967 0.0000262937 0.0002400118 -0.0001022603 0.0000613025 0.0005376081 0.0000927290 0.0001957998 0.0006191935 0.0000751926 0.0001162622 -0.0000197235 0.0003140753 0.0000927906 -0.0005512682 -0.0004314513 -0.0005689074 -0.0011225737 0.0001196636 0.0004994195 0.0003983346 0.0013048529 0.0009310189 0.0026802425 0.0004477867 0.0000044585 -0.0004940127 0.0011561971 0.0010651003 0.0015919543 0.0006081658 0.0006472589 0.0004329046 -0.0026789227 -0.0029513448 0.0003621904 -0.0018338380 -0.0029548526 -0.0022258197 -0.0106307552 -0.0074914854 -0.0082917565 0.0009400398 -0.0002340045 -0.0019648790 -0.0004513745 0.0013894991 0.0019550247 -0.0001502041 -0.0004944434 -0.0005150347 0.0000138436 -0.0001127805 -0.0000469067 -0.0000160599 -0.0000189580 0.0000184882 0.0000350732 0.0002147537 -0.0003745151 -0.0000506542 0.0000829171 0.0000366259 -0.0002191708 -0.0001916833 -0.0000842266 0.0001753816 0.0000073391 -0.0001054746 0.0005573777 0.0005674354 0.0003661504 -0.0001473163 0.0000854252 -0.0011084956 -0.0003449983 0.0004377299 0.0005052138 -0.0005915701 -0.0028750669 0.0032023553 0.0023780471 -0.0004939249 -0.0004437350 -0.0015238432 0.0005948067 0.0021484777 -0.0000201665 0.0000485956 0.0000816616 0.0000113033 -0.0001463995 -0.0000726425 0.0001046212 -0.0001274391 -0.0000761656 0.0001460769 0.0001577693 0.0009652146 -0.0002971050 0.0009088123 0.0002801954 0.0004883008 -0.0002542344 -0.0006976869 -0.0010259451 0.0133105048 0.0063692819 0.0122214853 0.0032814365 -0.0016403138 -0.0037858847 -0.0068236547 -0.0080981248 0.0024011159 0.0123057994 0.0212485641 0.0026749127 -0.0049160895 -0.0103210036 -0.0117659621 -0.0042014591 0.0058772475 -0.0241942550 -0.0114918212 -0.0140680998 -0.0038413706 -0.0061652786 -0.0125736036 -0.0004916067 -0.0008456546 0.0043808610 0.0013511993 -0.0054803344 -0.0135616026 0.0212946245 0.0022361284 -0.0310158728 0.0108014034 -0.0074967632 -0.0018132613 0.0032253608 0.0051982644 0.0129032272 -0.0058717501 -0.0071418592 -0.0223506624 0.0081244619 -0.0015570180 0.0076139593 -0.0090889853 0.0080307975 -0.0019876419 -0.0285855415 0.0208183497 0.0160654719 -0.0126613625 0.0091458692 0.0043270257 -0.0008044702 0.0000158024 -0.0044291343 -0.0073949976 0.0122350415 0.0166275066 0.0086124499 -0.0050121331 0.0219865122 0.0019535036 0.0002274610 -0.0043724117 -0.0020261515 -0.0005586329 -0.0016665393 0.0024867040 -0.0004689219 0.0045985411 -0.0013998108 0.0011596085 0.0015782059 -0.0638546341 0.0195351647 0.0359159870 -0.1040784688 0.0519618037 0.0708459621 0.0496583363 -0.0716756684 -0.0354703162 0.0427802161 0.1497719000 -0.0102324613 -0.2214446037 -0.0142847285 0.1223608554 -0.1924728584 -0.1251604468 0.0984632832 0.0678126932 0.0522268319 -0.0363136440 -0.0009074947 -0.1779242451 -0.0155033670 -0.2260344594 0.1375874303 0.1633214152 -0.1225344218 0.2664983962 0.0945653764 -0.1148052788 -0.0132438982 -0.0709273149 -0.0712833398 0.0017883709 -0.0372417096 0.0514666101 -0.0742052134 0.0372987186 0.0559442103 0.1751405227 0.0187818224 -0.2761678244 -0.0546384559 -0.1771780260 -0.2107182405 -0.2176257767 -0.1027559304 0.0737091807 0.0537280388 0.0381016927 -0.0066564720 -0.1629969869 0.0070551657 -0.2163763164 0.0907881738 -0.1242858171 -0.1509256769 0.1940381666 -0.0977921047 0.0000007063 -0.0000308660 0.0004158015 -0.0005016024 -0.0001118349 -0.0013196668 -0.0000004306 0.0002572028 0.0006255385 0.0005569093 0.0004078534 0.0007318469 -0.0004143839 -0.0000937203 -0.0001098142 -0.0035786585 0.0012634446 0.0020798397 0.0047593554 -0.0015608378 -0.0019546931 0.0019371012 -0.0008768015 0.0060186959 -0.0006129418 0.0002809988 0.0006999691 -0.0024973024 0.0003351480 0.0006808153 0.0011088819 -0.0003289016 -0.0004378313 -0.0002508524 -0.0006174673 -0.0000664806 -0.0009561198 0.0013486085 0.0000854007 -0.0030746108 -0.0042819560 -0.0019064060 0.0007124173 0.0009969295 0.0003760963 0.0038381464 -0.0003187905 0.0019085794 -0.0022929239 0.0025066924 -0.0007117978 -0.0054688795 0.0008407597 -0.0024583386 0.0033419622 0.0026313386 0.0011448830 0.0013666487 -0.0001694839 0.0010331885 -0.0013984785 -0.0076176544 -0.0061517980 -0.0036149340 0.0069561802 0.0046599478 0.0061494933 0.0105335963 0.0088114526 0.3844385904 -0.3225394166 -0.5117591686 -0.0928392310 -0.0826861424 0.0387424987 0.0652018629 0.0441970742 -0.0459843843 -0.0125987563 -0.0184415838 0.0184959055 -0.0302328011 -0.0190877823 0.0229141307 -0.0381098156 -0.0101233583 0.0490854463 0.0170744200 0.0152333695 -0.0076915081 0.0322764185 0.0042998927 -0.0446117213 -0.0298973969 -0.0103502502 0.0352628062 -0.0045356999 -0.0372835652 -0.0518346537 -0.0006625242 -0.0428104460 -0.0389818641 -0.0303680050 0.0365132811 0.0657000148 -0.0027669398 -0.0087639723 -0.0924725529 -0.1222735491 0.0013366427 0.2206960181 -0.0003933477 0.0014632869 0.0315634603 -0.0151298372 -0.0068365469 0.0146374043 0.0002176818 0.0047387651 0.0141975083 -0.0079948614 -0.0062271362 -0.0046710856 0.0139376015 0.0064837727 -0.0165646309 -0.0004485573 -0.0041288664 -0.0202807460 0.0212837636 0.0002049958 -0.0157938550 0.0180449846 0.0240307869 0.0503356970 -0.0019779490 0.0023686358 0.0323391175 0.0264572239 0.0207436675 0.0212965078 0.0325558051 0.0213487786 0.0092807210 -0.0035863953 -0.0011464089 0.0013537515 -0.0661596717 -0.0632414006 0.0412685699 0.0009530898 -0.0018002711 -0.0012685137 -0.1156630235 0.0503428377 0.2037983056 0.0998804763 -0.1428297129 -0.2349933455 0.0120567882 0.0570865156 0.0593229781 0.0031570737 0.0065228093 0.0015768573 -0.0011625481 -0.0037765891 0.0004191844 -0.0022602980 -0.0034161578 -0.0005025344 -0.0010991722 -0.0050181036 -0.0011672582 -0.0140057728 0.0123563862 0.0246456839 -0.0109677525 -0.0047835781 0.0026314491 -0.0078778630 -0.0093945185 -0.0050174642 -0.0032246090 -0.0056020716 0.0281450163 0.0055922235 0.0030875820 -0.0179503008 0.0056032406 -0.0066968424 0.0190185285 0.0129652103 -0.0146411782 -0.0035307938 -0.0248496728 0.0030765423 -0.0192598027 0.0129277865 -0.0049155456 -0.0130639411 -0.0048437209 0.0061348456 0.0077858666 -0.0058930037 0.0048433526 0.0041624497 0.0081573383 -0.0131118727 -0.0783668941 0.0288855002 -0.0661427708 -0.0284832905 -0.0250982711 0.0016629845 0.0373282720 -0.0013354154 -0.0025184968 -0.0036508527 0.0008829454 0.0013335038 0.0025556773 0.0024115403 -0.0004623834 -0.0022243945 -0.0013507434 0.0002784164 0.0012706413 -0.0002352845 -0.0002201076 -0.0005430584 -0.0004995290 0.0007070186 0.0016894595 -0.0058731208 0.0017685074 -0.0004549386 -0.0045602810 0.0041411444 0.0000499819 0.0043178637 0.0023691097 0.0090053484 0.0004183459 -0.0012209923 0.0002281582 0.0006669580 0.0005115431 0.0009744289 0.0002568236 0.0004754505 0.0014186609 -0.0020716914 0.0005797302 -0.0015926665 -0.0001111053 0.0004336658 0.0007130255 -0.0016119825 0.0010603690 -0.0003246134 0.0013770455 -0.0006004603 0.0007035666 0.0029912129 -0.0014081752 0.0006127705 0.0056014949 0.0000634102 0.0028480210 0.0065130893 -0.0020076712 0.0054269573 0.0039495160 -0.0043687119 -0.0026638991 -0.0006959775 -0.0016069297 0.0000884621 0.0004635811 -0.0002063430 -0.0035748013 -0.0037563561 -0.0016458798 -0.0038497964 -0.0031616761 0.0002782210 -0.0053206393 -0.0018580057 0.0008687557 0.0010155702 -0.0005507765 0.0002064095 0.0002258110 0.0003334926 0.0001162854 -0.0001190043 -0.0006119763 -0.0002382634 0.0003612782 0.0008907564 0.0006355659 -0.0004236448 -0.0002925019 -0.0004253903 -0.0002633546 -0.0006916406 -0.0012476571 0.0001019730 -0.0000756253 -0.0001142698 0.0000779943 -0.0001331472 -0.0001232329 0.0000825275 0.0002933389 -0.0003645605 -0.0006146801 -0.0000711312 -0.0009589759 -0.0001278788 -0.0002920761 -0.0003322089 -0.0001693306 -0.0024106748 0.0006924788 -0.0013036445 0.0005917254 -0.0003709729 0.0004222901 -0.0000756742 0.0011100192 -0.0001224187 -0.0028221646 -0.0001137431 -0.0020879639 -0.0010920666 -0.0002186845 -0.0006638437 0.0003080451 0.0008969936 0.0001383423 0.0005881304 -0.0017269050 0.0004532755 -0.0011050823 0.0011650721 -0.0007888538 -0.0010773608 0.0027225002 -0.0008416788 -0.0013285358 -0.0008213060 -0.0244448859 0.0536766729 0.0037331999 0.1306087473 0.0639919186 -0.0646487701 -0.1162641864 -0.0781343834 0.0163726032 -0.1502566060 0.0150614527 0.0066002634 -0.0197104790 0.1256682049 -0.0642035731 -0.1070915925 -0.0809476020 -0.0906279860 0.0851522099 0.1025113920 0.1477167604 -0.1130396057 0.0020411543 -0.0016759316 -0.0010201322 0.0050883390 0.0002568148 -0.0017195611 -0.0031480563 0.0018537784 0.0017244107 0.0001079663 -0.0007200856 -0.0001858609 0.0006114183 -0.0003393037 -0.0001413547 0.0007862299 0.0017629248 0.0004957897 0.0004398236 -0.0003907015 0.0002009371 -0.0025784241 -0.0000917789 -0.0012400764 0.0020020937 -0.0005033231 0.0010117353 0.0036595357 -0.0010196470 0.0017030090 -0.0012885694 -0.0009404724 -0.0008368715 -0.0009143486 0.0006675309 -0.0007205971 0.0005515522 0.0030237218 0.0035278598 0.0015645294 -0.0020056870 -0.0021340893 -0.0020817176 -0.0052889920 -0.0077074583 -0.2457402514 0.2435284293 0.4050792673 0.2080870554 0.2012008944 -0.0634487344 -0.1716368907 -0.1060941805 0.1361963607 0.1008535602 0.0768811211 -0.0735261176 0.0757686136 0.0337039717 -0.0785619429 0.1112731798 0.0007729992 -0.1891484281 -0.0532628645 -0.0205411687 0.0662916125 -0.1033321131 -0.0072175301 0.1688142763 0.0869528548 0.0313955007 -0.0947595777 -0.0254687302 0.1004315752 0.2032722419 -0.0544346319 0.0466962018 0.1013763959 0.0948237626 -0.0796124715 -0.1046925812 -0.0974251976 0.0790150801 0.1121686968 0.1310832750 -0.1587706499 -0.1598488670 -0.0162873636 -0.0194084321 -0.0236555463 0.0368314226 0.0182928004 -0.0295439620 0.0170838820 -0.0005778908 -0.0486172087 0.0135072970 0.0067391290 -0.0135732996 -0.0325398348 -0.0085989940 0.0529143279 -0.0067785910 0.0063697589 0.0415683621 -0.0224578351 -0.0125940119 0.0513313348 0.0039237469 -0.0284134490 -0.0578283554 0.0143947010 -0.0068690485 -0.0668611373 -0.0426903183 -0.0328436872 -0.0155077781 -0.0539192160 -0.0447278538 -0.0169483542 0.0185266806 0.0133039565 -0.0190399838 -0.0913446447 -0.1007355736 0.0477165498 -0.0006180996 -0.0005789821 -0.0019754546 -0.0933870538 0.0434821345 0.1462591838 0.0912094941 -0.1042440536 -0.1813577227 0.0089167448 0.0461290444 0.0458372718 0.0014443819 0.0025279416 0.0008713951 -0.0005771515 -0.0017156004 0.0001540709 -0.0009277165 -0.0015737489 -0.0001545148 -0.0007188912 -0.0028406974 -0.0005075756 -0.0196411461 0.0054287565 0.0206230443 -0.0065398540 -0.0045852696 0.0003541619 -0.0063262286 -0.0089789006 -0.0031677966 -0.0024694474 -0.0030515969 0.0184933983 0.0041731845 -0.0007380509 -0.0113526245 0.0007451778 -0.0080398673 0.0108483657 0.0072845838 -0.0114194607 -0.0027106885 -0.0180693575 0.0031113767 -0.0116997999 0.0069805859 -0.0025986205 -0.0081885708 -0.0024613861 0.0041004074 0.0036828366 -0.0022340529 0.0016639766 0.0019696509 0.0086082018 -0.0082332974 -0.0465762707 0.0205269025 -0.0368166400 -0.0198501781 -0.0149011318 -0.0021040787 0.0167772839 0.0004994793 -0.0019402105 -0.0036854905 -0.0004163434 0.0011154136 0.0021818731 0.0034374761 -0.0010681230 -0.0051557319 -0.0000787087 0.0029332239 0.0055923916 0.0013934505 -0.0009226705 -0.0025475512 -0.0038906604 0.0002756727 0.0038490023 -0.0041802330 -0.0017664112 0.0020794638 -0.0066888539 -0.0015935235 0.0036006418 -0.0032736776 0.0002545403 0.0086841561 -0.0014861081 -0.0004357847 -0.0045483778 0.0045563357 0.0003264228 -0.0034253351 -0.0004672588 0.0008765324 0.0009486825 -0.0004134480 -0.0002431920 -0.0009607945 -0.0003402798 0.0010213852 0.0015151041 0.0004836376 -0.0009094226 -0.0011198775 0.0005247236 0.0002063824 0.0012904931 0.0012429273 -0.0008835821 0.0004247080 0.0019834636 -0.0002082850 0.0000996240 0.0016727219 0.0001990182 0.0039056014 -0.0009541809 -0.0000150251 -0.0004974192 -0.0014410634 0.0015371848 -0.0007656239 0.0025140821 -0.0001496791 -0.0062783550 -0.0001776306 -0.0003723547 -0.0012659659 -0.0013242256 0.0000474173 -0.0025651609 0.0000566337 -0.0004325662 -0.0007186503 0.0008591928 -0.0026152566 -0.0007994703 0.0004490488 0.0026820984 0.0000884872 0.0017113282 0.0015182072 -0.0008062583 -0.0024613317 -0.0027705431 0.0011397498 -0.0007690743 0.0024504553 0.0007240202 0.0024855249 0.0035326969 -0.0010748784 -0.0001933020 -0.0011833188 -0.0000063265 0.0002070326 0.0023565070 0.0000903481 -0.0001503021 -0.0013493686 0.0000164193 0.0012479365 -0.0012553537 -0.0007969740 -0.0003363682 -0.0000275711 -0.0001769578 0.0010235195 -0.0001239528 0.0004984887 -0.0003746910 -0.0000675630 -0.0002184158 0.0004036564 -0.0001057839 0.0002404889 0.0002790321 -0.0002325402 0.0002238040 -0.0001464211 -0.0011231632 0.0000511064 0.0006319150 -0.0006108950 0.0003840245 -0.0007956045 0.0010236783 -0.0005118333 -0.0004510087 -0.0006356407 -0.0002382470 0.0001652255 -0.0018075053 0.0002172796 0.0020554807 0.0025839766 -0.0167512221 0.0395111733 -0.0036854546 0.0680968579 0.0254978316 -0.0553432604 -0.0801017207 -0.0730639026 -0.0085807407 -0.1004419659 0.0085639612 0.0044201585 -0.0136012762 0.0966805194 -0.0429022885 -0.0729977918 -0.0455310079 -0.0641639834 0.0529305592 0.0778510902 0.1079414204 -0.0699106678 0.0543386511 -0.1540789522 -0.0449330648 0.2036831639 0.0625373295 -0.0736653655 -0.0807486449 0.1111020576 0.0523469722 -0.0969607304 -0.1111590914 0.0274313515 0.1103067249 0.1295761649 -0.0348138382 -0.0381770221 0.0817844440 -0.0160651521 0.0430752336 -0.0538720795 0.0144907244 0.0797263495 0.0472009888 0.0384477747 -0.0700947776 -0.0727709585 -0.0332616373 -0.1225840765 0.0794948223 -0.0468491632 0.0079042730 0.0012741127 0.0013441758 -0.0107734657 0.0013772406 0.0024797443 0.0002426218 -0.0012500003 0.0017657819 0.0003168744 0.0001537663 -0.0002822280 -0.0007547378 -0.0002454456 -0.0005164612 0.0047618627 -0.0057706657 -0.0101159149 -0.0021283163 -0.0025601930 -0.0001720283 0.0015010607 0.0004636961 -0.0019061882 -0.0003799109 -0.0002010373 0.0009307915 -0.0002330538 0.0009685567 0.0018004751 -0.0015119714 0.0004881324 0.0032724222 0.0005271055 -0.0007046203 -0.0014768352 0.0011524780 -0.0004835071 -0.0028141242 -0.0016790130 -0.0018229977 0.0000143553 0.0011628647 -0.0013629117 -0.0040351461 -0.0008702761 -0.0014889526 -0.0026372877 -0.0017842600 0.0014003323 0.0019877537 0.0016249077 -0.0014203583 -0.0010915347 -0.0020743485 0.0048499087 0.0004795592 0.0005996227 0.0004620215 0.0000678452 -0.0016763992 -0.0009522001 0.0005551905 -0.0004092220 -0.0000345427 0.0011217976 -0.0004106174 -0.0001517189 0.0004649093 0.0011088324 0.0003525404 -0.0015885029 0.0004901036 0.0002531065 -0.0007505752 -0.0011399440 0.0014571522 0.0007051221 0.0002391861 0.0008285981 0.0020509173 0.0000594736 0.0002931840 0.0014124531 0.0014957209 -0.0008587494 -0.0000739986 0.0017606101 0.0012510831 0.0000247622 -0.0002795993 -0.0002053299 0.0004818558 0.0012085425 0.0006613503 -0.0016729950 0.0059347771 -0.0280507516 -0.0534328734 0.0037417245 -0.0018981915 -0.0061921688 -0.0035370604 0.0048518909 0.0080525425 -0.0005463647 -0.0022896207 -0.0022876198 0.0001305849 0.0000798348 0.0002003076 0.0000337048 0.0008101583 -0.0005120475 -0.0000477596 0.0002628732 0.0004307524 -0.0000425059 0.0001577505 -0.0000285452 0.0007958613 -0.0003021562 -0.0009262458 0.0001722781 0.0002562188 0.0001455656 -0.0033691707 -0.0065297614 -0.0005144486 0.0000695122 0.0001072676 0.0066171184 0.0020572134 -0.0033840614 -0.0024621196 0.0010367687 0.0010711365 0.0006708726 -0.0015245437 -0.0043429424 -0.0012755898 0.0003663507 0.0001451116 -0.0064832278 0.0003132856 0.0002081568 -0.0005205058 -0.0002161561 -0.0003218867 0.0005366098 -0.0001575744 -0.0008447165 -0.0006239355 -0.0001239193 0.0004351673 0.0013584578 -0.0001975403 0.0011514102 0.0005343221 0.0007732310 -0.0001776067 -0.0011403430 -0.0205526984 -0.0454219496 -0.0775142552 0.0479549552 0.0465260564 0.0459262832 0.0250502118 -0.0357580493 -0.0828325899 0.0100555719 0.0757748909 0.1337139024 -0.0332379831 -0.0491973019 -0.0619328902 -0.0318252472 0.0187587536 0.0628573966 -0.1171021045 -0.0359694833 0.0086133193 -0.0945543218 -0.0326941024 0.0033856507 0.0088776242 0.0043202077 0.0626429640 0.0676836694 0.0045181554 -0.0455654644 0.0888755379 0.0254134455 -0.0405423594 -0.0188475820 0.0310422613 0.0335834201 -0.0247259089 -0.0109197765 -0.0545471044 0.0088276573 0.0383050050 0.0882046004 0.0100544391 -0.0292141685 -0.0421485080 0.0247444868 0.0016647211 0.0413432732 0.0631365641 -0.0372803658 0.0033242326 0.0505786183 -0.0350027395 -0.0003908964 -0.0006555488 0.0095319120 0.0438866396 -0.0395364432 0.0141334798 -0.0274576207 -0.0506727377 0.0315621478 -0.0213635646 0.0143255883 0.0003315667 -0.0401664535 -0.0230685896 -0.0080032792 -0.0237393298 -0.0119526709 0.0011600211 -0.0262358418 0.0121790782 -0.0115905314 -0.0178692137 -0.0358581578 -0.2393955685 -0.0109319137 0.0643595355 0.2427089975 -0.0056588895 0.1136983888 0.1047138582 -0.0526717405 -0.1482330387 -0.2011028541 0.0650388713 -0.0712319132 0.1696689102 0.0591527457 0.1587351158 0.1873643314 -0.0735046322 0.0296580554 -0.1299637019 -0.0307225065 -0.0253660011 0.2247908387 0.0355580511 -0.1051293184 -0.1148605465 0.0533794927 0.0807189218 -0.1873386964 -0.0601386102 0.0066030455 0.1476004001 -0.0017307514 -0.0299805600 -0.1421007072 -0.0128651744 -0.0403539646 -0.0676780241 -0.0190758068 0.0569405027 0.1253007576 0.0234397263 0.0340123027 -0.0860609603 0.0300725144 -0.0828939496 -0.0872395229 -0.0383092374 -0.0477936334 0.0855534078 -0.0308407774 0.0499485002 -0.1501671892 0.0375983534 0.0743067595 0.0860997316 0.0378276922 -0.0569645527 0.1473390316 -0.0419765097 -0.0000119852 -0.0000448252 0.0007342701 -0.0017460560 0.0004363952 -0.0029814874 -0.0013271772 0.0015947792 0.0027716410 0.0027021437 0.0005378400 0.0036124587 -0.0002775561 -0.0000709304 0.0005652524 -0.0043300809 0.0011159671 0.0024737626 0.0015671780 0.0019271258 -0.0015168266 -0.0032860705 -0.0044334820 0.0028647398 0.0114880539 -0.0959352591 -0.0185270592 0.0814014448 0.0427468051 -0.0251152571 -0.0238320440 0.0593979404 0.0190071259 -0.0621460656 -0.1344153601 0.0196730581 0.0794423832 0.1068008344 -0.0281912409 0.0670537092 -0.1848491147 0.0359874259 -0.0400537159 0.1939115718 -0.0273907702 -0.0926946274 -0.0787755805 -0.0451509400 0.0862959022 0.1354019282 0.0429689875 0.1406242620 -0.1175139586 0.0494866345 -0.0092462012 0.0052687787 -0.0036471984 -0.0057360873 -0.0042917491 0.0026562391 0.0018564207 0.0000342526 -0.0005368806 -0.0005899859 0.0009322974 0.0006510300 -0.0003092709 -0.0005191232 -0.0002950372 0.0080192599 -0.0077796252 -0.0138972818 -0.0003498716 -0.0006739175 -0.0004522342 0.0000543599 -0.0003125514 -0.0005558502 0.0008597744 0.0004678022 0.0000464940 0.0002151506 0.0008395700 0.0008801469 -0.0003695947 0.0004194036 0.0011949693 -0.0001775528 -0.0009176390 -0.0006758895 0.0005177577 -0.0001289245 -0.0013121267 -0.0006301203 -0.0007578062 -0.0002653932 0.0006330485 -0.0002230867 -0.0013875217 -0.0009827661 -0.0006613015 -0.0009871090 -0.0015471582 0.0012704543 0.0021486908 0.0007609649 -0.0008823806 -0.0015851476 -0.0023654751 0.0026687919 0.0021642412 0.0010525289 0.0006386482 0.0000253150 -0.0020955530 -0.0012224468 0.0006881914 -0.0007302545 -0.0001801791 0.0013731277 -0.0006212944 -0.0003618709 0.0001526911 0.0012807377 0.0005564025 -0.0014809219 0.0007913544 0.0004823272 -0.0006240426 -0.0003624153 0.0008144571 -0.0007829646 0.0001514321 0.0007675551 0.0022912888 0.0004921298 0.0000982551 0.0015362586 0.0014068908 -0.0004406809 -0.0005161967 0.0024666682 0.0015933761 -0.0000329384 -0.0003258741 -0.0003669017 0.0004618391 0.0013892262 0.0022049315 -0.0025525882 -0.0022689437 0.0455524291 0.0989632979 0.0012056257 -0.0005519497 -0.0015962056 -0.0012671437 0.0007758858 0.0017685022 0.0000349334 -0.0002275807 -0.0002370637 -0.0003343871 -0.0003512826 -0.0003515234 0.0000050324 -0.0013130612 0.0008661206 0.0001437783 -0.0001923414 -0.0009242631 0.0001284071 -0.0000347580 0.0000598032 0.0003161319 0.0000211923 -0.0002128350 0.0001065443 0.0000720361 0.0000008703 0.0065474251 0.0124210971 0.0011361977 -0.0002302126 0.0000941075 -0.0134636468 -0.0040854537 0.0063814647 0.0053121802 -0.0018888214 -0.0025867698 -0.0002449843 0.0030674965 0.0076624620 0.0020434589 0.0001587742 -0.0002110475 0.0129249566 -0.0012632329 -0.0001370237 0.0016750623 0.0005425330 0.0003046026 -0.0011453262 0.0006077054 0.0012361304 0.0008360008 -0.0005729675 -0.0001421129 -0.0000091309 -0.0002917460 -0.0003090410 0.0001506986 -0.0000497673 0.0003507221 0.0002318763 -0.0074435634 -0.0281033191 -0.0525129259 0.0316243194 0.0303038299 0.0290965607 0.0137307151 -0.0230958191 -0.0516832527 0.0087637949 0.0493975414 0.0854490674 -0.0246493785 -0.0332757138 -0.0401877018 -0.0189947069 0.0128346797 0.0408987118 -0.0726997101 -0.0234296906 0.0057758796 -0.0578706866 -0.0213250557 -0.0007620025 0.0053673785 0.0028267243 0.0414054545 0.0474989011 0.0055567092 -0.0277111999 0.0586295970 0.0178161686 -0.0254876576 0.0355090157 -0.0569646166 -0.0591655299 0.0393940773 0.0212382473 0.0942703039 -0.0119844139 -0.0704258709 -0.1562530418 -0.0231059093 0.0563842505 0.0761152706 -0.0413054086 -0.0051145880 -0.0742212148 -0.1092342065 0.0667893911 -0.0055264697 -0.0848937371 0.0610950110 0.0060432792 0.0005161391 -0.0170571110 -0.0799358305 0.0759063882 -0.0311274400 0.0451623633 0.0913238979 -0.0588883935 0.0357534650 0.0094105088 0.0002045631 -0.0263975864 -0.0149805174 -0.0052291896 -0.0155409875 0.0216735449 -0.0020876387 0.0475507419 -0.0218539676 0.0209171841 0.0323600411 -0.0343319194 -0.1395088339 0.0002072321 0.0340586089 0.1528735842 0.0010497486 0.0650568953 0.0567345373 -0.0305138139 -0.0802709916 -0.1105763103 0.0351201671 -0.0476264932 0.0945700188 0.0366677605 0.0844464374 0.0980042441 -0.0395022738 0.0211214196 -0.0780014477 -0.0204724848 -0.0170606342 0.1280168716 0.0219329913 -0.0791100792 -0.0637648509 0.0418820151 0.0437084065 -0.1122820733 -0.0338056547 -0.0217353842 -0.2505781579 -0.0048528553 0.0301047659 0.2331161657 0.0119058078 0.0714463140 0.1104950009 0.0342653540 -0.0938708914 -0.1963711038 -0.0396064055 -0.0749568241 0.1415331104 -0.0549885559 0.1313530999 0.1487221803 0.0602408384 0.0748058843 -0.1295459265 0.0480982003 -0.0731368267 0.2272836319 -0.0555914131 -0.1225544214 -0.1283667819 -0.0617893738 0.0855615775 -0.2142323878 0.0630847522 -0.0000951909 -0.0000679465 0.0002271958 -0.0006161323 0.0002398013 -0.0006363218 -0.0000326158 0.0004486206 0.0005427562 0.0010918941 0.0006839529 0.0008287300 -0.0003057925 -0.0001526341 0.0001685581 -0.0002588773 0.0009421319 0.0010014419 0.0015423526 0.0009575908 -0.0013713056 -0.0001618925 -0.0006147373 0.0010374802 0.0512069802 0.0257004478 -0.0123269806 0.0798551851 -0.0261149897 -0.0302069440 -0.0595195187 0.0020898594 0.0271590210 0.0467376842 0.0683234305 -0.0213688830 -0.0597944373 -0.0571241444 0.0239556739 -0.0857501805 0.1590423605 -0.0428382990 0.0731050754 -0.1404013772 0.0427933862 -0.0729403071 0.0549677082 -0.0306858307 0.0415780917 -0.1091341024 -0.0054924728 0.1112314553 0.0355803092 0.0276666392 0.0085262174 -0.0063498343 0.0044715482 0.0039686426 0.0034617976 -0.0022733149 0.0012112498 -0.0005304422 -0.0003012756 -0.0011518877 0.0009779831 0.0006579714 -0.0012277141 -0.0004259855 -0.0001699442 0.0105299171 -0.0101345336 -0.0179169594 0.0018391954 0.0011859099 -0.0014074070 -0.0019351934 -0.0017388832 0.0007241179 0.0026184771 0.0016166713 -0.0010111646 0.0013147384 0.0018148416 0.0004498061 0.0007245353 0.0006096898 -0.0004326946 -0.0008777929 -0.0015106700 -0.0001942872 -0.0008132928 -0.0006039960 0.0003247697 -0.0000953724 -0.0012640315 -0.0018932600 0.0006772493 0.0007669368 0.0001937918 -0.0021118903 -0.0005745350 -0.0003112565 -0.0011155916 0.0010823491 0.0021901513 -0.0005616571 -0.0004749506 -0.0013405177 -0.0020444019 0.0013576752 0.0004768356 0.0041896518 0.0025401220 -0.0003952201 -0.0058237248 -0.0036446490 0.0012259527 -0.0024137902 -0.0010486544 0.0025254639 -0.0025846746 -0.0019368611 -0.0008176911 0.0032658212 0.0017164873 -0.0025759546 0.0029013856 0.0022258519 0.0001708561 -0.0008164758 0.0002805306 -0.0031788031 0.0003225636 0.0012685285 0.0055864078 0.0013279691 0.0009533828 0.0043242445 0.0020028296 -0.0014044742 -0.0033911934 0.0066815361 0.0041274094 -0.0009167916 -0.0000590897 -0.0001589264 0.0002614633 -0.0008876663 -0.0003029873 -0.0014383840 0.0017560104 0.1401943603 0.2435835106 -0.0002244370 0.0001670932 0.0010301288 -0.0000734198 -0.0016622466 -0.0018751036 0.0004310381 0.0010672008 0.0010229549 -0.0007716966 -0.0007583389 -0.0007955683 0.0000530033 -0.0030642431 0.0020802200 0.0002139964 -0.0005464910 -0.0019787115 0.0003084494 -0.0001645809 0.0001315879 0.0001100357 0.0002336571 0.0001740793 0.0000680667 -0.0000102380 -0.0000492171 0.0145265836 0.0283100227 0.0020848033 -0.0008423553 0.0001960598 -0.0306661099 -0.0090588504 0.0145737044 0.0115781713 -0.0037843238 -0.0047020594 -0.0014050421 0.0063942535 0.0173770265 0.0047650855 0.0011730453 -0.0008179681 0.0285434815 -0.0027981341 -0.0003725058 0.0035806441 0.0012150882 0.0008979169 -0.0025883172 0.0012983826 0.0029102439 0.0020098592 -0.0010090844 -0.0005646642 -0.0010802138 -0.0002805246 -0.0014599321 -0.0001368773 -0.0006266916 0.0007860255 0.0010984725 -0.0210215090 -0.0560504659 -0.0767753249 0.0308905308 0.0390656639 0.0441754825 0.0304423150 -0.0276969451 -0.0740935748 0.0052281948 0.0614914326 0.1106014454 -0.0273006675 -0.0401442089 -0.0515137923 -0.0254545509 0.0206297765 0.0566616472 -0.0871309854 -0.0260446450 0.0222502682 -0.0863829320 -0.0249530680 0.0144596452 0.0083876119 0.0052863119 0.0618295406 0.0582097962 0.0040443535 -0.0363156821 0.0760243651 0.0211035855 -0.0224515274 0.0584901701 -0.1184484377 -0.1375513863 0.0947565328 0.0358235890 0.2026187838 -0.0256480792 -0.1441573837 -0.3213644778 -0.0579226303 0.1231685838 0.1593229140 -0.0787802341 -0.0277983600 -0.1639157868 -0.2079404492 0.1351264893 -0.0474596530 -0.1873893173 0.1287900182 -0.0064297726 0.0013340343 -0.0426525842 -0.1928301722 0.1710877231 -0.0753185946 0.0820885449 0.1915677559 -0.1207250648 0.0364451252 0.0131516380 0.0000096518 -0.0382694811 -0.0211102495 -0.0075463650 -0.0225377492 0.0492513958 -0.0039022381 0.1107387850 -0.0498480308 0.0485199125 0.0762966463 0.0339387918 0.0343313535 -0.0133545733 -0.0094842526 -0.0361612179 0.0001543765 0.0087346366 -0.0053338883 -0.0054816507 -0.0107222582 0.0099768736 0.0071153101 -0.0005761837 -0.0013734469 0.0004307015 -0.0014790570 0.0252815577 0.0034515364 -0.0259176162 0.0295144432 0.0183889234 0.0217446975 -0.0404722632 -0.0166650203 0.0455281896 0.0166524187 -0.0258023616 -0.0012028866 0.0631610061 0.0055839983 0.0046403810 0.1232653491 -0.0006579635 0.0272744687 -0.1374494147 0.0176784315 -0.0829687181 -0.0613440456 -0.0447612650 0.0879643395 0.1068861895 0.0430790714 0.0854534956 -0.0908621664 0.0590003734 -0.0704690627 -0.1475762586 -0.0263144122 0.0034497319 0.0354136456 0.0002264094 -0.0088160710 -0.0656982604 -0.0009192599 0.0253156397 0.0344999400 0.0129077100 -0.0390475585 0.0051668243 -0.0226936871 -0.0001442359 -0.0000671575 -0.0000695990 0.0000148996 0.0001892112 0.0007905872 0.0007166423 -0.0002459608 -0.0008166254 0.0002133300 0.0008398010 -0.0007972448 -0.0002490709 -0.0001929700 -0.0000983261 0.0022170468 0.0012149781 0.0004175328 0.0007574523 0.0009353895 -0.0011709351 0.0009435710 0.0009160436 -0.0001197068 0.0736213778 0.0857427299 -0.0021466339 0.0965043256 -0.0669715676 -0.0267529434 -0.0865721181 -0.0261876009 0.0342797328 0.1143440482 0.0783190293 -0.0435110341 -0.1251333098 -0.1090700873 0.0441976520 0.0233251787 -0.0386898277 0.0084687642 -0.0346592450 0.0151080310 -0.0104808141 -0.0041591879 -0.0228891311 -0.0035039968 0.0107949754 0.0386082955 0.0136114798 0.0026721043 -0.0271103410 0.0092779166 -0.0031783860 -0.0000140812 -0.0010947028 0.0095021334 0.0024866585 -0.0042675822 0.0008344719 0.0004625828 0.0011449118 -0.0004381613 -0.0000827846 -0.0004230890 -0.0008853129 -0.0007067096 -0.0011249439 0.0109888762 -0.0126869236 -0.0218385799 0.0013704742 -0.0001101607 -0.0023840461 -0.0021810468 -0.0025530308 -0.0001436109 0.0036898988 0.0023466971 -0.0012190831 0.0022361737 0.0040295861 0.0021217595 0.0000034769 0.0011466899 0.0015394750 -0.0006139021 -0.0023972666 -0.0011581821 -0.0014962403 -0.0022373579 -0.0010653762 -0.0017391556 -0.0044703541 -0.0039124802 0.0019710974 -0.0001433663 -0.0029493138 -0.0052174287 -0.0032846919 -0.0038228893 -0.0026446719 0.0018314953 0.0031609811 0.0008122722 -0.0015847000 -0.0001860903 -0.0018495790 0.0072412371 -0.0041816236 0.0050464543 0.0030802772 -0.0010313355 -0.0080458588 -0.0049926093 0.0015696925 -0.0028898714 -0.0011864404 0.0035770910 -0.0030419444 -0.0022087455 -0.0001655432 0.0046712134 0.0021100493 -0.0043588067 0.0036413092 0.0027795319 -0.0003284199 -0.0036493347 0.0028171467 -0.0007407374 -0.0001460796 0.0034869776 0.0077874200 0.0012582089 0.0021408739 0.0054478592 0.0037198041 -0.0035794015 -0.0038635161 0.0087743640 0.0056806564 -0.0012777145 0.0001839020 0.0000957655 0.0005423302 -0.0017762800 -0.0002629635 -0.0022153026 -0.0045457567 -0.0521401131 -0.0949555168 0.0066938201 -0.0035483967 -0.0109580037 -0.0062598747 0.0088457655 0.0145943735 -0.0010642268 -0.0043247759 -0.0042430417 0.0002529946 0.0001948079 0.0003442235 -0.0000308043 0.0012231509 -0.0008661052 -0.0000900877 0.0004079714 0.0006380653 -0.0000943409 0.0002522926 -0.0000587506 0.0014998577 -0.0005331624 -0.0016938227 0.0002156235 0.0005017964 0.0003795722 -0.0048145372 -0.0095959316 -0.0005346172 0.0007824982 0.0000852953 0.0102476137 0.0030077573 -0.0052918184 -0.0035299506 0.0016690143 0.0017568689 0.0013037303 -0.0022970702 -0.0068340097 -0.0020521632 0.0005125849 0.0002249141 -0.0102772731 0.0005262927 0.0003284971 -0.0008498206 -0.0003466780 -0.0004315890 0.0008494716 -0.0001456082 -0.0013197822 -0.0009862659 -0.0001185249 0.0008076003 0.0018248281 0.0000792324 0.0016384069 0.0007244696 0.0013411305 -0.0003699825 -0.0021187841 -0.0465638568 -0.1602717368 -0.2281359461 0.0969287475 0.1162805078 0.1256132486 0.0746463900 -0.0806381906 -0.2051469033 0.0247957306 0.1794442466 0.3154799249 -0.0947269678 -0.1230016367 -0.1486685238 -0.0620722263 0.0629661022 0.1605714357 -0.2465162673 -0.0800653037 0.0628004977 -0.2358820118 -0.0747160388 0.0282879428 0.0239272303 0.0151650993 0.1775635034 0.1837187393 0.0237632134 -0.0960704236 0.2166385532 0.0652403359 -0.0537814502 -0.0260378928 0.0482710100 0.0521642457 -0.0303677363 -0.0160079091 -0.0738679694 0.0061215027 0.0569174330 0.1213359522 0.0281879477 -0.0517498986 -0.0612723127 0.0250799744 0.0136162840 0.0611038152 0.0784732661 -0.0542085912 0.0164404824 0.0659386264 -0.0483997557 -0.0033304252 -0.0009921274 0.0165832672 0.0736379415 -0.0703807496 0.0349659092 -0.0266841593 -0.0705285474 0.0467551224 -0.0082943957 0.0376083191 0.0000482395 -0.1092934936 -0.0609558331 -0.0218221013 -0.0651532345 -0.0185299877 0.0014509783 -0.0417935403 0.0192999887 -0.0187805719 -0.0295298450 0.0652269791 0.1171884676 -0.0206819639 -0.0350109212 -0.1091655685 0.0052804006 -0.0002906056 -0.0330220887 -0.0034183378 0.0056187822 0.0598639777 0.0027972693 0.0057112416 -0.0350687676 -0.0078268536 -0.0345776328 0.0170139791 0.0215921720 -0.0603271301 0.0836477085 0.0446365904 0.0507962352 -0.1277421904 -0.0418998883 0.1065000443 0.0562707042 -0.0602754467 -0.0167951241 0.1636492647 0.0219080938 -0.0000393631 -0.0519286753 0.0018807525 0.0016180307 0.0565925330 -0.0010988117 0.0269152909 0.0249180118 0.0143778122 -0.0307979373 -0.0461658149 -0.0143939040 -0.0275556723 0.0357240324 -0.0220387404 0.0290852375 0.0481274742 0.0120007876 0.0068134788 -0.0232280576 0.0049223017 -0.0063297818 0.0409057845 -0.0060718503 -0.0181028485 -0.0232388600 -0.0095838775 0.0186958057 -0.0255561526 0.0122553295 -0.0000420441 -0.0000705253 0.0013180262 -0.0031549586 0.0009587566 -0.0051473861 -0.0022404523 0.0023898410 0.0043485370 0.0046855250 0.0013340303 0.0058515375 -0.0006035347 -0.0001627525 0.0010875671 -0.0067416720 0.0019448315 0.0041197514 0.0031607888 0.0037437974 -0.0030654161 -0.0055671613 -0.0072404202 0.0044604173 -0.0013261712 -0.0015289158 -0.0000854820 -0.0017570226 0.0011672846 0.0003897470 0.0013186881 0.0004703087 -0.0004836132 -0.0016207349 -0.0010531844 0.0006296634 0.0020727869 0.0011591953 -0.0007592844 -0.0000683013 0.0007838949 0.0000140696 0.0007727871 -0.0000151884 0.0002768762 -0.0016932286 -0.0002798678 -0.0008585866 0.0014893640 0.0002816486 0.0008829504 0.0017843362 -0.0008596296 0.0010333087 -0.0006689772 -0.0005021233 -0.0002161348 -0.0006862873 0.0002577612 -0.0001929291 0.0014073416 0.0016841637 0.0013691009 0.0007372767 -0.0011328163 -0.0012825468 -0.0022242589 -0.0010063118 -0.0016595539 0.0816098377 -0.0721888814 -0.0859520405 0.0456114915 0.0399321188 -0.0199413337 -0.0407026776 -0.0291822838 0.0263378820 0.0378827756 0.0194095939 -0.0296795541 0.0224032644 0.0195241657 -0.0094423942 0.0238498317 0.0046627664 -0.0343094777 -0.0164587095 -0.0122088954 0.0113886910 -0.0297450242 -0.0102371151 0.0360551424 0.0117405270 -0.0101887688 -0.0328965786 -0.0004075454 0.0230420225 0.0369633566 -0.0134021406 0.0140113132 0.0256479957 0.0091809831 0.0022306673 0.0044173894 -0.0567835709 -0.0064279860 0.0284956558 0.0423814030 -0.0534730415 -0.1991821536 0.2747470193 0.1688247009 -0.0577182594 -0.3032520691 -0.1962607072 0.0598570848 -0.1612746018 -0.0761191054 0.1373142535 -0.1618386262 -0.1282828775 -0.0577230395 0.1729041086 0.0923163577 -0.1161327869 0.1679366780 0.1271765064 0.0329363508 0.0061623846 -0.0639463761 -0.2789315963 -0.0148072288 0.0637821779 0.2741283304 0.0524064471 0.0931120202 0.2344110341 0.0541082423 -0.0245866408 -0.2293027111 0.3599717636 0.2347283091 -0.0597785090 0.0056271547 0.0046695029 -0.0040955460 -0.0362399446 -0.0389529313 0.0178467786 -0.0001276120 -0.0013434610 -0.0024758150 0.0037284100 -0.0023772075 -0.0024085464 -0.0020153266 0.0031422618 0.0047556605 -0.0002232434 -0.0016332409 -0.0013561407 -0.0000075941 -0.0000020514 0.0000353774 -0.0000235454 0.0000291596 -0.0000679896 -0.0002930621 0.0000302622 0.0000195954 -0.0000249444 0.0000708640 -0.0000286743 0.0008557402 0.0000704344 -0.0005606883 0.0001883134 0.0000471440 0.0001826140 0.0001342590 0.0002953671 0.0000845215 0.0002037464 0.0000425794 -0.0003292527 -0.0001026511 0.0000300668 0.0001384588 0.0010542563 0.0002874051 0.0010016936 0.0018367410 -0.0005366290 -0.0002969516 0.0008797953 -0.0002755352 0.0002756962 -0.0000536283 -0.0000309167 0.0004664166 0.0001133473 -0.0001270104 -0.0002925166 0.0004274452 0.0001575473 0.0000681622 0.0008648948 0.0003983357 0.0006525701 -0.0011621975 -0.0005684887 -0.0003689256 0.0009250322 -0.0008507707 -0.0003838947 0.0021778235 0.0043628317 0.0056049428 -0.0042796008 -0.0037765311 -0.0032176395 -0.0003493374 0.0025355667 0.0048072662 -0.0011706826 -0.0053707734 -0.0090233033 0.0044465024 0.0043902004 0.0042112107 -0.0000733048 -0.0020327149 -0.0033718953 0.0078683209 0.0031271999 -0.0007553308 0.0052792545 0.0021732287 0.0014868514 -0.0015095894 0.0001964660 0.0005811936 -0.0075833310 -0.0028913863 0.0016164121 -0.0052720945 -0.0021786077 0.0002794681 -0.0011013369 0.0016048922 0.0013459312 -0.0002766322 -0.0006703718 -0.0017139136 -0.0000897592 0.0017058981 0.0032574762 0.0012935343 -0.0018502439 -0.0017014036 0.0000988074 0.0006408230 0.0013810551 0.0020761444 -0.0018253846 0.0002546979 0.0012969621 -0.0013992805 -0.0005466656 -0.0003357410 0.0004474889 0.0012873365 -0.0024338956 0.0018148885 -0.0003054115 -0.0011704173 0.0015875293 0.0002405727 0.0000401147 -0.0001855270 -0.0001689103 0.0011218417 0.0001847486 0.0005796582 -0.0002730171 0.0000203385 -0.0006575957 0.0005358941 -0.0004775657 -0.0007039328 -0.0008199675 -0.0016136973 0.0002648712 0.0003262963 0.0014092839 0.0000043795 -0.0002309037 0.0004202187 0.0001689557 0.0001375540 -0.0006843762 -0.0001506513 0.0001419023 0.0003063042 0.0000189846 0.0003763875 -0.0005543481 -0.0002303461 0.0010463236 -0.0011724671 -0.0007561214 -0.0008239190 0.0017765600 0.0006495572 -0.0016500656 -0.0006952923 0.0010623815 0.0001339263 -0.0023423274 -0.0002170386 -0.0002561240 -0.0002222317 -0.0001227902 0.0004823139 0.0000552860 0.0002313321 -0.0004218576 -0.0000219043 -0.0002609187 0.0003925368 -0.0000101140 0.0002256436 0.0004713200 -0.0001750541 0.0004260926 -0.0000552502 -0.0007984251 0.0000928227 0.0006076615 -0.0004446687 0.0003564019 -0.0006004228 0.0006918459 -0.0003841234 -0.0006590030 -0.0004092707 -0.0002787622 0.0000193344 -0.0012460362 0.0001412603 -0.0007403539 0.0004144433 -0.0004418913 0.0047788073 -0.0071626160 0.0032009908 0.0046068774 0.0048581262 0.0024328320 -0.0007882565 -0.0040455197 0.0036857978 -0.0002166848 -0.0006708814 0.0006585009 0.0098192928 0.0071281113 0.0047044579 -0.0091470164 0.0176998331 -0.0053483311 -0.0098321256 -0.0045874585 -0.0093641099 0.1750326862 -0.0956882142 -0.0992988501 0.2706843194 0.0126196604 -0.1225668785 -0.2001064633 0.0936515944 0.1084803355 0.1216696017 0.0378471153 -0.0606007344 -0.1434701077 -0.0380917205 0.0654255267 -0.1047245244 0.0721553821 -0.0543944109 0.0828321091 -0.0677808162 0.0506115452 -0.1890748389 -0.0201242908 -0.0922239163 0.1676331843 0.0282751204 0.0831794957 0.2191624777 -0.0862526052 0.0981037311 0.0102171664 -0.0044514203 0.0062753972 0.0125335761 0.0016924997 -0.0076754140 0.0059775239 -0.0012713679 0.0005261165 -0.0038474138 0.0035634165 0.0021031031 -0.0041380017 -0.0028518525 -0.0026822433 -0.0040610167 0.0030933361 -0.0002302337 -0.0030375977 -0.0037700355 -0.0008142205 0.0031983497 0.0010621974 -0.0037936066 -0.0037402620 0.0004958009 0.0060287784 -0.0012306186 0.0006901155 0.0032052552 -0.0024000160 0.0018628752 0.0070494184 -0.0002640555 -0.0034363353 -0.0048394201 0.0045213996 0.0003932721 -0.0075288592 -0.0023596000 -0.0007894427 0.0023961549 0.0023323574 -0.0008214198 -0.0065351360 0.0064985017 0.0075282548 0.0025760440 0.0016311705 -0.0004008007 -0.0008602742 -0.0000776305 0.0002855233 -0.0000540666 -0.0010956913 -0.0001269434 0.0032279667 -0.0021322570 -0.0023768275 -0.0036288780 0.0027264515 0.0023983416 0.0025211351 -0.0004625198 0.0011275287 0.0056228968 0.0029064771 0.0035260479 0.0053829872 -0.0002601669 -0.0012861486 -0.0044362585 -0.0028931534 -0.0035952235 -0.0060355010 0.0057635010 0.0006768658 -0.0059727301 -0.0019165528 -0.0040767918 -0.0033679575 -0.0030539638 -0.0015718660 0.0008120017 0.0031605111 0.0053751613 0.0055086622 -0.0026953584 -0.0004865548 0.0037200616 -0.0010329041 -0.0008408734 0.0018853084 0.0073233445 0.0083076758 -0.0099747729 0.0146019744 -0.0511525743 -0.0522342498 -0.0023037173 0.0012663815 0.0033974738 0.0025017932 -0.0024901030 -0.0045294819 0.0001705978 0.0011822497 0.0011223465 0.0002764491 0.0001724714 0.0002164462 -0.0000558672 0.0007853016 -0.0005480972 -0.0000338556 0.0002785069 0.0000588258 -0.0001589986 0.0000060209 -0.0000363547 -0.0007878072 0.0000695609 0.0006180093 -0.0000288240 -0.0001812797 -0.0001548261 -0.0036740291 -0.0076519513 -0.0003355270 0.0000174872 -0.0001225555 0.0080791804 0.0022927940 -0.0036868023 -0.0030691342 0.0006634511 -0.0017678376 0.0055098469 0.0011574224 -0.0061045774 -0.0020708189 -0.0025998552 0.0008536400 -0.0062571831 0.0009366998 0.0000360392 -0.0011585621 -0.0004883588 -0.0001666753 0.0009113650 -0.0003906056 -0.0008223714 -0.0005467304 0.0002883286 -0.0001800682 -0.0003085752 0.0001536771 -0.0002029059 -0.0003102343 -0.0001880070 -0.0000831789 0.0001990574 0.0241175420 0.0621143365 0.0673927394 -0.1105685183 -0.0701700207 -0.0286970913 0.0724953846 0.0297415166 -0.0019361509 -0.0610847584 -0.0566036581 -0.0580231578 0.1285656469 0.0761765543 0.0337343065 -0.0803641189 -0.0377430280 0.0031005719 0.1081028172 0.0767937282 0.0160775811 -0.0123753688 0.0387643036 0.0790234605 -0.0174235270 -0.0092246124 -0.0579097870 -0.1306580715 -0.0741010895 -0.0344476842 0.0096882305 -0.0378134665 -0.0938623864 -0.0876775914 0.0855724747 0.0298890568 0.0691705843 -0.0449686589 0.0094791843 -0.0428665851 0.0523193783 0.0438460939 0.0988147838 -0.0906605216 -0.0342313084 -0.0733952677 0.0533102051 -0.0089263716 0.0766902296 -0.0945759254 -0.0364837909 -0.0341884096 -0.0186404051 -0.0820497188 -0.0105187165 0.0173353967 0.0468371937 -0.0925067094 0.0899921075 0.0500784886 0.0328188539 0.0159702217 0.0958044243 -0.0078482251 0.0002329087 0.0268120842 0.0246241849 0.0094874065 0.0267727820 -0.0068459960 0.0000139292 -0.0181355604 0.0160475905 -0.0160421450 -0.0248909283 0.0381214109 -0.0172054394 -0.0198969635 0.0044469388 0.0371506904 0.0008684481 0.1327154131 0.0261514508 -0.0718815893 -0.1314017701 -0.0657999784 0.0686593199 -0.1031454912 0.1001271818 0.0680554692 0.0624534358 0.1987754600 -0.0168171666 -0.0914774180 0.0428597141 0.0588676957 0.0755599657 -0.0468923399 -0.0491570079 0.0973758367 0.0057070556 -0.0585626875 0.0374496859 0.1546832498 -0.0099344588 -0.0060124794 -0.0325483230 -0.0012456763 0.0371474800 0.0047987708 0.0173452000 -0.0827277557 -0.0074940784 -0.0481881367 0.0710189889 0.0138730337 0.0402825793 0.0739709929 -0.0297267494 0.0458379760 -0.0102903494 -0.1306179336 0.0057463974 0.0984851155 -0.0586073136 0.0578669262 -0.0873856026 0.0904056843 -0.0548601413 -0.1083367875 -0.0521822576 -0.0571554119 -0.0019963708 -0.1758242771 0.0102964086 0.0000470497 0.0000371070 -0.0003386751 0.0009867298 -0.0003646428 0.0013040344 0.0006743044 -0.0009866781 -0.0014028559 -0.0016743179 -0.0004101038 -0.0019384620 0.0000058467 0.0002348335 -0.0006058647 -0.0010154408 -0.0011170521 -0.0010414608 0.0030531871 -0.0048247041 0.0006561882 0.0048754418 0.0028915230 0.0035670022 0.1301629868 -0.0667980560 -0.0737467208 0.1882709992 0.0066467707 -0.0844160285 -0.1504952508 0.0643735447 0.0811087468 0.1268263654 0.0150258609 -0.0506214223 -0.1268728264 -0.0344180635 0.0535986148 0.1230158476 -0.0867026752 0.0590827860 -0.1260017646 0.0695725906 -0.0563858223 0.1870427519 0.0130528090 0.0915848777 -0.1631052767 -0.0231907048 -0.0816235649 -0.2038327085 0.0769018212 -0.0902534753 -0.0087350705 0.0064538289 -0.0082115441 0.0090140971 0.0030767618 -0.0074435342 -0.0011056093 -0.0038808208 0.0051038497 0.0002234717 0.0008712608 -0.0015169586 0.0008355293 0.0013044374 -0.0013567162 -0.0058864256 0.0062606372 0.0107057762 0.0001955590 -0.0004010284 -0.0012884349 0.0001823825 -0.0005148723 -0.0009982800 -0.0010753245 0.0010403192 0.0024434087 0.0003042800 0.0011183426 0.0012301294 -0.0003855690 0.0010693165 0.0024371445 -0.0006439353 -0.0020775421 -0.0021023882 0.0010118203 -0.0003500809 -0.0022161491 -0.0008816824 -0.0009162806 -0.0003459363 0.0011064362 0.0004085295 -0.0022666995 0.0031992569 0.0044148673 0.0023116947 0.0018062067 -0.0014285031 -0.0022521401 -0.0014844738 0.0008735073 0.0015408537 0.0020061851 -0.0028582081 -0.0032036857 0.0013235816 0.0008566003 -0.0002815340 -0.0007579741 -0.0006225359 -0.0000555203 -0.0006353824 -0.0004073340 -0.0000658220 -0.0008111346 -0.0008043471 -0.0009542071 0.0003663663 0.0003993720 0.0005545151 0.0006611864 0.0005787472 0.0007424590 0.0003719061 -0.0012340328 -0.0014255801 0.0003252526 -0.0002998712 0.0007837492 0.0003447355 0.0007655416 0.0000436000 -0.0007843323 0.0004165950 -0.0013416649 0.0008322540 0.0009123760 -0.0005989318 -0.0001805073 -0.0002210420 0.0001391095 -0.0005240336 0.0014243537 -0.0002177782 -0.0362308073 0.0603268791 0.0370516701 -0.0004324546 0.0002432905 0.0007498342 0.0006485009 -0.0004257189 -0.0009115109 0.0000264700 0.0001502662 0.0002621164 -0.0000820311 -0.0000762334 -0.0001748674 -0.0000248563 -0.0006938716 0.0004696824 -0.0001243699 -0.0003181575 -0.0002585007 0.0000065953 -0.0000570180 0.0000362095 -0.0002194969 -0.0000135843 0.0001538838 -0.0000065331 -0.0000556932 -0.0000585811 0.0030368442 0.0061073790 0.0004570751 -0.0000075611 0.0000546344 -0.0064537179 -0.0017969176 0.0031300814 0.0021830538 0.0000406801 0.0013722642 -0.0020881234 0.0002194974 0.0046547186 0.0014333104 0.0019375035 -0.0008040043 0.0051889241 -0.0003871478 -0.0001202658 0.0006674976 0.0002272453 0.0002243293 -0.0005388255 0.0002767578 0.0006940941 0.0004881551 0.0001330281 0.0000296538 0.0000529995 -0.0000247683 0.0002091022 -0.0000194397 -0.0000209678 -0.0000582812 -0.0000801837 0.0355309588 0.0468448448 0.0361675970 -0.1054095242 -0.0598264980 -0.0162316773 0.0801273960 0.0223447573 -0.0218527892 -0.0567687205 -0.0384344377 -0.0274080617 0.1164647276 0.0627107636 0.0185763854 -0.0875012751 -0.0299415980 0.0226064118 0.0954019206 0.0718825160 0.0277390925 -0.0337228898 0.0315644222 0.0816462497 -0.0154328524 -0.0074998971 -0.0378077842 -0.1079948876 -0.0691583973 -0.0423935886 0.0365430030 -0.0309593355 -0.0987078168 0.1133530509 -0.1032746910 -0.0267723455 -0.0990440768 0.0559824859 -0.0305628610 0.0564925924 -0.0540473534 -0.0281298695 -0.1212127665 0.1050087041 0.0291927406 0.1049640552 -0.0661896430 0.0311101274 -0.0918606127 0.1165083110 0.0582798259 0.0597136287 0.0133717912 0.1073749367 0.0142834545 -0.0182468218 -0.0398940233 0.1009241324 -0.1069484486 -0.0708813023 -0.0670066909 -0.0076413741 -0.1283085037 -0.0037551445 0.0002010728 0.0147300528 0.0182242192 0.0071681550 0.0196896745 0.0037280092 0.0003367585 0.0117838347 -0.0159341802 0.0159688741 0.0244524288 0.0245596136 0.0169372055 -0.0097631529 -0.0004245427 0.0030493684 -0.0013447886 0.1182250045 0.0095493960 -0.0654930786 -0.1092614841 -0.0379735955 0.0588322095 -0.0968197659 0.0751981157 0.0606145795 0.0403236809 0.1704658244 -0.0071497784 -0.0973887398 0.0587502813 0.0647542945 0.0784751417 -0.0751928131 -0.0534829452 0.1196875016 0.0170280782 -0.0760494136 0.0287355893 0.1707519405 -0.0039830245 0.0015343063 0.0027624404 -0.0011518695 -0.0234925872 0.0267213888 -0.0115713415 0.1221937698 0.0250108188 0.0711185868 -0.1077795724 -0.0481257653 -0.0590767053 -0.1234237174 0.0617865449 -0.0863122542 0.0287820201 0.1870757361 -0.0005654192 -0.1194884788 0.0536942339 -0.0693134700 0.1012451938 -0.0805283674 0.0621237197 0.1257444752 0.0443750526 0.0656146705 0.0163421980 0.1934027773 -0.0037260535 -0.0000274607 -0.0000129759 -0.0000413818 0.0002734014 -0.0001318215 0.0004266988 0.0005292652 -0.0002658645 -0.0006349680 -0.0003915372 0.0002074337 -0.0007993276 -0.0000126054 -0.0000603311 -0.0000056729 0.0016013929 0.0001988771 -0.0003588016 -0.0008094428 0.0006504051 0.0000549691 -0.0000006144 0.0005684147 -0.0012058006 0.0003054670 -0.0009488528 -0.0005027488 0.0005801776 0.0005362976 -0.0008380430 -0.0006825547 0.0006945487 0.0005373274 0.0002317523 0.0000796157 -0.0001380325 -0.0001382590 -0.0003834816 -0.0001106797 -0.0007160771 0.0011578021 -0.0006388525 0.0007379249 -0.0006973627 0.0004169822 -0.0019402996 -0.0000645871 -0.0008535198 0.0025652537 -0.0006879011 0.0011555354 0.0025303601 -0.0007658113 0.0009471502 0.0000478157 0.0002585557 0.0003140509 -0.0002982720 0.0006905995 0.0004154564 0.0012028570 -0.0020288622 -0.0017597953 -0.0020546912 0.0019312440 0.0021405117 0.0013672576 0.0046008257 0.0014375448 0.3472736277 -0.3350174694 -0.5737743999 0.0692964066 0.0818164961 0.0077169849 -0.0710966735 -0.0310854591 0.0756084608 0.1050116226 0.0012013416 -0.1278037886 0.0248139130 -0.0117475657 -0.0614491569 0.0557072462 -0.0276395787 -0.1397768077 -0.0183210572 0.0408982216 0.0879533049 -0.0685678922 0.0109538145 0.1377397761 0.0531796653 0.0274537926 -0.0385420655 -0.0480950280 0.0374023802 0.1430392028 -0.0803490092 -0.1105358230 0.0126415392 -0.0980471262 0.0676018114 0.1120684573 0.0633386793 -0.0407858575 -0.0715327343 -0.0831279993 0.0845009099 0.1492093083 -0.0297333300 -0.0324120048 -0.0418780919 0.0221098365 0.0264006426 0.0443050421 -0.0084432128 0.0181274459 0.0949759987 0.0380845985 0.0506031636 0.0954233935 0.0095614783 -0.0168397422 -0.0923522581 -0.0366793308 -0.0502007560 -0.0986720901 0.0728798209 0.0310076232 -0.0824591757 -0.0556938091 -0.0400621967 -0.0620719728 -0.0612478663 -0.0277990378 0.0674148332 0.0664774715 0.0658109867 0.0825158239 -0.0189737231 0.0024508752 0.0606027708 0.0131690901 0.0099194349 -0.0177216259 -0.1776445775 -0.1954834711 0.0973127532 -0.0035592887 0.0018655950 -0.0018954729 0.0332573158 -0.0183834690 -0.0443425656 -0.0333402060 0.0314288456 0.0587085840 -0.0026604573 -0.0144825679 -0.0143457993 -0.0003528673 -0.0002735673 -0.0001905467 0.0002378668 0.0003359793 -0.0000053033 0.0002617050 0.0001095567 0.0002637373 0.0002843561 0.0006240419 0.0000709454 0.0083961699 -0.0005272196 -0.0069889322 0.0015362920 0.0017085627 0.0003755390 0.0013784647 0.0021534343 0.0004873034 0.0001208453 0.0007098551 -0.0043773744 -0.0009774810 0.0007192526 0.0027306151 0.0007803681 0.0054270843 -0.0059843187 -0.0041311931 0.0047675473 0.0013708124 0.0062809858 -0.0014350860 0.0023434128 -0.0017199937 0.0005779578 0.0021225104 0.0006341310 -0.0010421052 -0.0008557404 0.0002105290 -0.0000551619 -0.0003045165 -0.0036226792 0.0020261064 0.0106294813 -0.0040871084 0.0075050294 0.0043973595 0.0035860044 0.0015897386 -0.0039647942 0.0020838626 0.0028210254 0.0028998072 -0.0051573978 -0.0035523841 -0.0013924597 0.0027406427 0.0021154482 0.0021373527 -0.0029598235 -0.0049765273 -0.0075863627 0.0053682073 0.0045864759 0.0036297591 -0.0019111832 -0.0016270520 -0.0012500565 0.0048754708 0.0052791909 -0.0006259001 0.0015126869 0.0045275838 0.0028914385 0.0015397675 0.0015243761 0.0086627530 -0.0067421745 -0.0038063011 0.0019068525 -0.0026390169 -0.0023506177 -0.0008447555 0.0040264339 -0.0029411677 0.0001731684 -0.0043351936 0.0017394835 -0.0028087183 0.0020665597 -0.0005679131 0.0017587954 -0.0034276002 0.0023432235 -0.0003826235 0.0044194936 -0.0019686461 0.0029505830 -0.0025440412 0.0037366708 0.0030882485 0.0033495571 -0.0005489522 0.0037197482 0.0000867957 -0.0000760231 0.0001554952 0.0016059576 -0.0019773080 -0.0029051104 -0.0038307717 0.0013957615 -0.0045908510 0.0006537073 -0.0002143073 -0.0037866597 -0.0017570994 -0.0007142152 -0.0025680020 -0.0001217638 0.0000032619 -0.0003209391 0.0000334498 0.0000326249 0.0000783785 0.0001897059 -0.0004442794 -0.0001360246 -0.0000180289 0.0004006166 0.0000510975 0.0002683429 0.0002342652 -0.0001178978 -0.0003356863 -0.0003323247 0.0001641730 -0.0002679874 0.0003921669 0.0000822780 0.0003050385 0.0005240632 -0.0001664520 -0.0000520853 -0.0001002369 0.0000239060 0.0000733231 0.0002285179 -0.0000221251 0.0001738308 -0.0001998081 -0.0001151895 0.0001420345 -0.0000171412 -0.0001019971 0.0001014260 0.0000197412 0.0000909580 0.0001321257 -0.0002716589 0.0000366715 -0.0010245315 -0.0002262991 -0.0005812058 0.0008778551 0.0004111542 0.0004838148 0.0008284994 -0.0005323579 0.0004522626 -0.0002930923 -0.0016252908 -0.0000258295 0.0011287366 -0.0004395335 0.0006536315 -0.0009040585 0.0007155322 -0.0005510238 -0.0011156163 -0.0003229015 -0.0005931123 -0.0001973246 -0.0015589982 -0.0000067133 -0.0015395364 -0.0009641822 0.0036974997 -0.0123267726 0.0021250426 -0.0160368975 -0.0085519220 0.0210039369 0.0271778415 0.0286533776 0.0027272913 0.0366196614 -0.0008323612 -0.0000784684 0.0027637080 -0.0356141990 0.0181178457 0.0261621542 0.0072425147 0.0216218809 -0.0135400197 -0.0354918782 -0.0477815934 0.0265959859 0.1433982410 -0.0260783536 -0.0686807289 0.1365990807 0.0042249561 -0.0520635396 -0.0985628668 0.0441834550 0.0497202804 0.0615282418 0.0122497822 -0.0270281429 -0.0788383667 -0.0195449198 0.0367553507 0.0175591206 -0.0139080676 0.0079738276 -0.0203822895 0.0092863715 -0.0065239877 0.0217947977 0.0007861277 0.0101228171 -0.0277690381 0.0044434727 -0.0128318156 -0.0225504024 0.0084175660 -0.0083625590 -0.0002177497 0.0012288418 -0.0013586400 0.0091089374 -0.0009159820 -0.0049034021 -0.0004748644 -0.0007111685 0.0016396041 0.0000041440 0.0003639662 -0.0006455291 0.0004962688 0.0003775210 -0.0004898806 0.0045482516 -0.0020617011 -0.0042023524 -0.0031425217 0.0015876020 0.0087577713 0.0028809124 0.0061901680 0.0040580709 -0.0022781900 -0.0083628703 -0.0075638720 -0.0048311878 -0.0114528703 -0.0089292315 0.0011281344 -0.0065002863 -0.0117661212 0.0044954813 0.0129440378 0.0107214304 -0.0002095307 0.0072719017 0.0121263247 0.0065325490 0.0114483946 0.0071827601 -0.0075273152 -0.0022554757 0.0117053984 -0.0082511647 -0.0163571495 -0.0070217011 -0.0005245829 0.0016513258 0.0018949399 0.0000660063 -0.0008438681 -0.0008740996 -0.0013595451 0.0003343115 0.0001431645 0.0017136075 0.0015877088 0.0022067101 -0.0013947869 -0.0012671530 -0.0014776507 -0.0002250323 -0.0009259370 -0.0029955279 -0.0017999136 -0.0021250396 -0.0034964335 -0.0000640290 0.0007995950 0.0028609354 0.0017601005 0.0020725997 0.0035003486 -0.0019694641 -0.0016565582 0.0010623249 0.0024339895 0.0022683492 0.0039465993 0.0031441449 -0.0001208691 -0.0010247682 -0.0021803441 -0.0022195157 -0.0036442570 0.0022766230 0.0001363072 -0.0020959648 0.0004973095 0.0002889525 -0.0022413098 -0.0150774349 -0.0178899672 0.0122212317 0.0270307529 -0.0139997658 0.0130024362 -0.0008841618 0.0004842984 0.0014136611 0.0006801034 -0.0013690278 -0.0021433826 0.0002348893 0.0008576172 0.0006919263 -0.0000471197 -0.0001461600 0.0000012528 0.0000719048 0.0000372185 0.0000305184 0.0000897044 0.0001693648 -0.0001559710 0.0000108329 0.0000263120 0.0000061744 -0.0001835821 0.0001101889 0.0002367037 0.0000288146 -0.0000541758 -0.0000687736 -0.0001808141 -0.0004065052 -0.0001035529 -0.0007645711 0.0000939400 -0.0002589694 0.0000003268 0.0001862576 -0.0000558400 -0.0006782008 -0.0019880967 0.0014306027 0.0010419413 -0.0006834678 -0.0003063943 -0.0011966544 0.0004585555 0.0010960013 -0.0000599685 -0.0000029519 0.0000521003 0.0000137786 -0.0000679376 -0.0000535780 0.0001092682 -0.0001275627 -0.0000645250 -0.0000806744 -0.0002652849 -0.0004294968 -0.0001503847 -0.0006643582 -0.0001044865 -0.0001020568 0.0000345050 0.0005846772 -0.2219673885 -0.0461232943 0.1028153752 0.2660570901 0.1078390687 -0.0219179662 -0.2484440266 -0.0240056445 0.1551195510 0.1219128206 0.0107703041 -0.0749976315 -0.2332077771 -0.0928535375 0.0262791812 0.2660304322 0.0334044107 -0.1699701643 -0.2253230383 -0.1780336786 -0.1523288480 0.1902072274 -0.0482601092 -0.2286984003 0.0251069886 0.0057891702 -0.0275044926 0.1574740649 0.1462215878 0.1426324101 -0.2452740301 0.0403578666 0.2782173263 -0.0275412223 0.0203338126 -0.0003737793 0.0276922599 -0.0118512789 0.0165681422 -0.0124793467 0.0047151222 -0.0081089944 0.0228428377 -0.0164725744 0.0014502080 -0.0297464094 0.0131272556 -0.0194220876 0.0203954462 -0.0257474690 -0.0218016976 -0.0215238098 0.0022749871 -0.0253062653 -0.0042044250 0.0011130921 -0.0062889007 -0.0119503712 0.0176186621 0.0183259777 0.0295699607 -0.0063870288 0.0305324768 -0.0129089855 0.0005126001 0.0332487794 -0.0083868116 -0.0039230214 -0.0069592546 0.0027482982 -0.0002195862 0.0057118156 0.0005197270 -0.0003846840 -0.0001480278 -0.0006063906 0.0079729513 0.0026799696 0.0154721400 0.0072131359 -0.0091112029 0.0879358309 0.0048720393 -0.0488752576 -0.0764816140 -0.0290346648 0.0408840163 -0.0762205689 0.0526606779 0.0472586133 0.0246871115 0.1116875422 -0.0038403992 -0.0687277482 0.0356975001 0.0448425761 0.0510900264 -0.0449187619 -0.0344863297 0.0781654957 0.0064578661 -0.0489399444 0.0215104286 0.1055980375 -0.0045301201 -0.0063709587 -0.0046407007 -0.0038924453 0.0063242123 0.0086029628 0.0032947503 0.0298054161 0.0069540634 0.0173054251 -0.0252078503 -0.0145861246 -0.0135975744 -0.0308701145 0.0161248384 -0.0222675674 0.0076779291 0.0414599639 0.0007967067 -0.0272641110 0.0078786784 -0.0155826704 0.0202011059 -0.0120184012 0.0121463129 0.0285179850 0.0048591228 0.0148879876 0.0064913684 0.0346956638 0.0012618994 0.0000113523 0.0000411982 -0.0002845944 0.0006686563 -0.0004448730 0.0007502664 0.0000377160 0.0002046009 0.0001561066 -0.0005462344 -0.0009087491 0.0001317492 0.0003056742 0.0000789120 -0.0002531527 -0.0000112301 -0.0003037240 -0.0002506069 -0.0010278821 -0.0007442122 0.0008084278 -0.0000021378 0.0002521143 -0.0001697913 -0.0184028713 0.0045627802 0.0086145946 -0.0213842384 -0.0008619494 0.0085845006 0.0123274251 -0.0070427307 -0.0062886117 0.0032963356 -0.0037733725 0.0022372523 0.0042358440 -0.0008698578 -0.0036458894 0.0782760205 -0.0502819365 0.0411579969 -0.0588661606 0.0384032103 -0.0302132396 0.1243684705 0.0133611975 0.0570474775 -0.1655216371 0.0199279415 -0.0745567869 -0.1447007749 0.0577054336 -0.0550030818 -0.0104408039 0.0023910233 -0.0055886639 -0.0023411097 0.0014074657 0.0001422495 -0.0002283917 -0.0009291661 0.0012698820 0.0000107717 0.0000939714 -0.0004323722 0.0006307146 0.0009208354 -0.0002676809 0.0071725198 -0.0070616446 -0.0103022004 0.0008123440 0.0018948428 0.0018217966 -0.0008386209 0.0005969370 0.0022958703 0.0016903044 -0.0015447696 -0.0040093032 -0.0004202676 -0.0024987885 -0.0030723104 0.0013357176 -0.0019218876 -0.0051386760 0.0004970704 0.0034391615 0.0039360327 -0.0014779101 0.0016816204 0.0054174686 0.0025042430 0.0024841155 0.0005092486 -0.0025951256 0.0003009393 0.0050374489 -0.0032506421 -0.0059035794 -0.0011190704 -0.0017068949 0.0013877649 0.0021863436 0.0008941729 -0.0004199109 -0.0006405457 -0.0010756117 0.0012999147 0.0022786192 -0.0005742587 -0.0014173213 -0.0036733854 0.0004389906 0.0009613015 0.0026161719 -0.0010554779 0.0007265292 0.0057249629 0.0017321582 0.0026425488 0.0055091787 0.0009332535 -0.0006983942 -0.0055536920 -0.0015699859 -0.0023742023 -0.0052436019 0.0040459376 0.0012509844 -0.0052244992 -0.0034659320 -0.0037142485 -0.0041179950 -0.0033348176 -0.0016518301 0.0045526828 0.0037239089 0.0033763161 0.0038568075 -0.0004359020 0.0004351396 0.0032663990 0.0003854492 0.0004397408 -0.0009293260 -0.0067964672 -0.0107169890 0.0054854991 0.2077642421 -0.1132665477 0.0926747713 0.0000637738 -0.0000850229 0.0001168265 -0.0005472297 -0.0007436671 -0.0004628355 0.0002409352 0.0005453208 0.0003655218 -0.0002801411 -0.0001890260 -0.0001035096 0.0000958909 -0.0003654205 0.0003165038 0.0001531878 0.0001041402 -0.0003364615 0.0001805266 -0.0000326554 -0.0000054159 0.0003103458 0.0001551051 -0.0000671367 -0.0000054484 0.0000185944 0.0000325655 0.0016496858 0.0038016391 -0.0002560886 -0.0002528989 -0.0000032126 -0.0043932925 -0.0011471951 0.0016354991 0.0016616240 -0.0007098832 -0.0020789410 0.0016773364 0.0017193154 0.0006375576 0.0000737381 -0.0008748605 0.0002871406 0.0035144904 -0.0008729997 0.0000429210 0.0005433250 0.0002238553 0.0002335522 -0.0003632619 0.0000255849 0.0003712243 0.0002523956 -0.0005595360 -0.0002427683 -0.0003591870 -0.0001368268 -0.0006187268 -0.0000243991 -0.0003682538 0.0004125210 0.0005521504 0.0368956192 0.0083346240 -0.0161802963 -0.0460696414 -0.0189648161 0.0033569536 0.0426543038 0.0043650584 -0.0261417081 -0.0215517865 -0.0025277633 0.0121122202 0.0407577901 0.0165139756 -0.0040765646 -0.0457473000 -0.0060282869 0.0286252849 0.0397568455 0.0309324104 0.0259570250 -0.0320851661 0.0084178759 0.0394582902 -0.0035648457 -0.0009844605 0.0032162305 -0.0277209095 -0.0256574805 -0.0242898275 0.0420522308 -0.0073792790 -0.0483828277 -0.2277434398 0.1710111939 0.0007744613 0.2270432926 -0.0988277888 0.1322484649 -0.1063334586 0.0448138618 -0.0600929518 0.1929781882 -0.1415632260 0.0075894063 -0.2440377700 0.1102819617 -0.1537731442 0.1734100107 -0.2153443486 -0.1773564347 -0.1732275523 0.0166572329 -0.2097151022 -0.0281106740 0.0090358250 -0.0371665603 -0.1040777638 0.1514222381 0.1507789143 0.2421523688 -0.0489972800 0.2567762942 0.0017511506 -0.0000660030 -0.0046081673 0.0014181811 0.0007195843 0.0013824154 0.0177665123 -0.0014052331 0.0373871635 0.0045912248 -0.0043239268 -0.0039993209 -0.0040605485 0.0090896873 0.0029122010 -0.0002219775 -0.0098411540 -0.0012818422 0.0013512658 -0.0036226817 -0.0011577989 0.0009382536 0.0049719502 -0.0000128437 -0.0024852831 -0.0027085299 0.0007654416 -0.0033849981 0.0004293059 0.0019769221 -0.0053032838 0.0062864516 0.0039896180 0.0038271003 -0.0097105658 -0.0031888091 0.0098800126 0.0037310328 -0.0068114342 -0.0009099053 0.0106714946 0.0014975708 -0.0177366736 0.0164939390 -0.0120923811 0.0065948770 0.0058687085 0.0051190602 0.0924497405 0.0120179934 0.0539612021 -0.0748568026 -0.0289714872 -0.0413882407 -0.0902697125 0.0375085279 -0.0605999133 0.0143226866 0.1267942030 -0.0032178984 -0.0999431164 0.0414248347 -0.0577154537 0.0768351721 -0.0649203897 0.0473396883 0.1091866955 0.0304200610 0.0576112342 0.0138373908 0.1378689400 -0.0015922061 0.0000071675 0.0000424956 -0.0000722968 -0.0000364283 -0.0000027829 0.0000097006 -0.0004077516 0.0000966749 0.0002195764 0.0001192742 -0.0003053987 0.0005096157 0.0001381669 0.0001015278 -0.0002219580 -0.0013851942 0.0005960009 0.0009006118 0.0003208278 -0.0003913562 -0.0001206275 -0.0004216032 -0.0013029929 0.0018150825 0.0008848626 0.0017992073 0.0000319073 0.0001151681 -0.0008012843 0.0004311816 0.0001105055 -0.0005934410 -0.0002691718 -0.0006954351 -0.0001670823 0.0003820288 0.0016427384 -0.0014032062 -0.0008937292 0.0028454366 0.0001334061 0.0014688014 -0.0011804825 0.0008608557 -0.0006631828 0.0013014171 0.0004366779 0.0006698808 -0.0015943223 -0.0010006854 -0.0009050557 -0.0010175788 0.0009931124 -0.0005664372 -0.0019089608 -0.0005750832 0.0001447295 -0.0012764486 0.0010987468 -0.0001163342 0.0012066137 -0.0014280387 -0.0010617883 -0.0017629541 0.0010098859 0.0014757725 0.0000949710 -0.0019499463 -0.0011554879 -0.2026894844 0.1796743618 0.3161431829 0.0148876603 -0.0202730612 -0.0614687000 -0.0123394683 -0.0394567417 -0.0369434594 -0.0071275829 0.0538481173 0.0702278006 0.0323236258 0.0847521367 0.0712676365 -0.0149951275 0.0493140793 0.0994465745 -0.0242615865 -0.0907689479 -0.0864210050 -0.0017728727 -0.0648210025 -0.0987262488 -0.0557070305 -0.0915306411 -0.0504852651 0.0633223068 0.0079676994 -0.0999590776 0.0716180640 0.1381124688 0.0445444154 0.0442288901 -0.0436448809 -0.0612367930 -0.0327078424 0.0438591663 0.0794269908 0.0875475786 -0.0565063092 -0.0893027294 -0.0047513513 -0.0535146018 -0.1899469462 0.0064435957 0.0303259961 0.1059458971 -0.0552534059 0.0212205878 0.2400076899 0.0679717717 0.1070970752 0.2320567295 0.0417445170 -0.0276813437 -0.2287265726 -0.0540800963 -0.0871430368 -0.2034627942 0.1621475332 0.0486350362 -0.2376767843 -0.1691120175 -0.1756828457 -0.2070870984 -0.1403808478 -0.0550547997 0.1847688325 0.1449595491 0.1344080065 0.1358484123 -0.0071189878 0.0251381291 0.1272734541 0.0013992995 0.0038258919 0.0148157482 0.1195250544 0.1526306102 -0.0791053915 -0.0009407776 0.0014493709 0.0006682722 -0.0240261975 0.0098444244 0.0373592459 0.0270208391 -0.0269112817 -0.0463052260 0.0021243407 0.0133730997 0.0120883601 -0.0001331184 -0.0002977067 0.0000820783 0.0001002323 -0.0000500271 0.0000526628 0.0002026262 -0.0006320476 0.0007196746 -0.0000266691 -0.0004341919 -0.0000239148 -0.0075885635 0.0008218813 0.0056742764 -0.0006828607 -0.0013556918 -0.0004147274 -0.0019557210 -0.0031198253 -0.0008317088 -0.0010995673 -0.0003556236 0.0036959270 0.0010637905 -0.0011578942 -0.0019347077 0.0001497202 0.0047779841 -0.0079190482 -0.0051801179 0.0012573109 0.0009375582 -0.0003023255 -0.0005014740 -0.0030991148 0.0005631743 -0.0003290768 -0.0011467432 0.0000735745 0.0009513841 -0.0002921230 0.0003124738 0.0001646813 0.0004146131 -0.0012641190 -0.0030582011 -0.0092327862 0.0058033125 -0.0090325237 -0.0064668754 -0.0041719813 0.0018146726 0.0011608985 -0.0068856426 -0.0032556966 0.0006996593 0.0105019221 0.0052601499 0.0003152310 -0.0086735381 -0.0019676209 0.0029641169 0.0056139404 0.0034198847 0.0025847517 -0.0100138725 -0.0054427842 -0.0015096402 0.0087071260 0.0020129145 -0.0039911744 -0.0097521820 -0.0090716692 -0.0035648126 0.0045251882 -0.0041645746 -0.0083196255 -0.0009710945 -0.0013851539 -0.0061047971 0.0080316422 0.0064371664 0.0029908626 -0.0056014088 0.0018021042 0.0094778940 0.0021224123 -0.0019727091 -0.0005677654 -0.0016871764 0.0010873230 -0.0002408962 0.0010789204 -0.0012912263 -0.0011024131 -0.0021617670 0.0020075110 0.0007371523 0.0017818857 -0.0012032520 0.0004575539 -0.0019862170 0.0026451299 0.0010377170 0.0008689925 0.0005903364 0.0019113172 -0.0001769251 0.0003190939 0.0006366120 0.0017903128 -0.0021427151 -0.0009334921 -0.0012319693 0.0000279230 -0.0025237090 -0.0006679183 0.0001770453 0.0030374148 0.0012739665 0.0005584563 0.0018445808 -0.0000075347 -0.0000545719 -0.0002346789 0.0001102383 -0.0001388832 -0.0001882077 0.0012917404 0.0001439306 -0.0006804097 -0.0011856417 -0.0004793117 0.0006352430 -0.0028277464 -0.0001617821 0.0015683259 0.0022630867 0.0009295570 -0.0012077149 0.0028033216 -0.0018164195 -0.0016674267 -0.0007949382 -0.0034031670 0.0001631732 0.0021855130 -0.0009291136 -0.0014030337 -0.0015246917 0.0012095470 0.0010122741 -0.0023501841 0.0000794748 0.0015161529 -0.0007057162 -0.0028443839 0.0002114206 -0.0011880769 0.0006689093 -0.0007388500 0.0013362269 -0.0001841554 0.0007350084 0.0032955637 0.0003863705 0.0019162405 -0.0026025063 -0.0011166528 -0.0014320496 -0.0031034347 0.0012140286 -0.0019612757 0.0004631191 0.0041836055 -0.0000761902 -0.0034785131 0.0012828907 -0.0020035643 0.0024674005 -0.0019578316 0.0015122128 0.0040477715 0.0008882353 0.0021462357 0.0005478700 0.0044102121 0.0000248795 0.0008461910 0.0017938331 -0.0040117968 0.0099867894 -0.0014412970 0.0126748321 0.0025376047 -0.0182308896 -0.0231220493 -0.0211494866 -0.0037716842 -0.0248069069 0.0005861835 0.0019823391 -0.0039684558 0.0248986686 -0.0095060329 -0.0185127704 -0.0036588487 -0.0206572068 0.0121103494 0.0251623068 0.0273103085 -0.0097378839 0.0035607319 -0.0011820534 -0.0021124673 0.0022259018 0.0006604567 -0.0010777750 -0.0020202448 0.0013154257 0.0011018435 0.0012249570 0.0001934572 -0.0005239337 -0.0013309909 -0.0007159563 0.0006563891 0.0013095153 -0.0000526349 0.0006341554 -0.0005474985 0.0003526464 -0.0002018365 0.0006283994 0.0002682473 0.0002660205 -0.0016615514 0.0001129675 -0.0007030009 -0.0004134898 0.0005405516 0.0000178001 -0.0003257693 -0.0002247485 -0.0003782663 -0.0003574026 0.0003291888 -0.0003699673 0.0008916425 0.0017640725 0.0013233058 0.0006890962 -0.0013571432 -0.0011630615 -0.0013464709 -0.0011720460 -0.0033168259 0.2101094858 -0.2496081580 -0.3407896759 0.1370078477 0.0468644604 -0.1725032601 -0.1380959244 -0.1647259725 -0.0061364896 0.1538138103 0.1733989168 0.0176455314 0.1344873776 0.2451150163 0.1332890966 0.0333126228 0.1109449582 0.1018634422 -0.1078013270 -0.2236063690 -0.1347567749 -0.1025907107 -0.1841445568 -0.1066708614 -0.0962263074 -0.2444842470 -0.2094974668 0.1208889000 0.0789898507 -0.0943011833 0.1012306365 0.2421807284 0.1590170317 -0.0857810512 0.0289720298 0.0608124837 0.0633439672 -0.0371245395 -0.0770777003 -0.0457680472 0.0433702252 0.1207544773 -0.0213655975 0.0096062142 0.0782216517 0.0110744531 0.0000125645 -0.0321124589 0.0280379556 0.0001192087 -0.0771158427 -0.0133935294 -0.0277942145 -0.0696685406 -0.0185478500 0.0045817197 0.0717228371 0.0070054679 0.0175574114 0.0540743009 -0.0449719465 -0.0061049661 0.0841365347 0.0578251081 0.0674514840 0.0664397827 0.0393633691 0.0127680398 -0.0615573446 -0.0400627792 -0.0339060605 -0.0229002708 -0.0095731106 -0.0141228364 -0.0335026263 0.0227737990 0.0265089593 0.0199999014 0.0533094433 0.1213994415 -0.0776848063 0.0027562993 -0.0019454818 0.0004358079 0.0093532164 -0.0046756931 -0.0140166355 -0.0114672025 0.0101142774 0.0173291505 -0.0004592453 -0.0047773149 -0.0042720303 -0.0001081138 0.0001031512 0.0000203382 0.0000482695 -0.0000206149 -0.0000086461 -0.0000118591 0.0002154208 -0.0002468834 0.0001133600 0.0001575609 -0.0000292559 0.0032851289 -0.0000650489 -0.0023364412 0.0003447860 0.0006220332 0.0001541696 0.0004766398 0.0014190627 -0.0001697585 0.0004981580 0.0001110973 -0.0014819590 -0.0003675985 0.0002771906 0.0007703183 0.0002423254 -0.0014474157 0.0024083817 0.0013717855 -0.0004133748 -0.0002862650 0.0002801867 0.0001668828 0.0010467724 -0.0003195793 0.0001240001 0.0005017539 0.0000335473 -0.0004838568 0.0000443564 -0.0002208434 -0.0000819140 -0.0001848141 -0.0004561189 0.0007838588 0.0031048818 -0.0026237629 0.0025288606 0.0027271710 0.0014043127 -0.0002646176 0.0001327693 -0.0060434526 0.0022331168 0.0088249160 0.0046818258 -0.0001274560 -0.0036084507 -0.0082406869 0.0022864255 0.0107824393 0.0025584925 -0.0064826448 -0.0146385518 -0.0041578694 0.0014510724 0.0059833183 0.0097577862 -0.0006698579 -0.0095399266 -0.0011539356 -0.0040637444 -0.0054497728 0.0126364124 0.0028285287 -0.0063574719 0.0028346066 0.0038121818 0.0184964405 -0.0019321582 0.0030219801 0.0085236603 -0.0141519217 -0.0010418276 0.0109882075 -0.0033354039 0.0027596345 0.0004449665 0.0028192331 -0.0015597875 0.0009913103 -0.0014034344 0.0013125305 0.0006641260 0.0030051869 -0.0026039589 -0.0005680210 -0.0032624231 0.0017186583 -0.0015134350 0.0031227249 -0.0035232185 -0.0022889953 -0.0017255532 -0.0003416835 -0.0030458399 -0.0006323748 -0.0001020063 -0.0018541316 -0.0025187779 0.0035573784 0.0018417294 0.0036008555 0.0001896262 0.0037285559 0.0017436630 -0.0005114954 -0.0081430335 -0.0041278215 -0.0022269874 -0.0060192070 0.0004972220 -0.0000193778 0.0011611966 0.0000010882 0.0000782784 0.0002794172 -0.0000031121 -0.0000795548 0.0000506847 0.0002217160 0.0002964588 -0.0001098697 0.0015504052 0.0001214527 -0.0008619147 -0.0013289014 -0.0005725785 0.0007026206 -0.0013907839 0.0009196507 0.0008337005 0.0004133159 0.0017980158 -0.0000609000 -0.0010732236 0.0005279307 0.0006834910 0.0007995568 -0.0005878055 -0.0005383347 0.0013566271 0.0000300721 -0.0007173324 0.0004245447 0.0015670781 -0.0000765133 -0.0012788574 0.0003496000 -0.0007625945 0.0014844811 0.0000075337 0.0007938722 0.0028536281 0.0003459974 0.0016650535 -0.0021993153 -0.0010269368 -0.0012015899 -0.0029033193 0.0010864859 -0.0019474547 0.0003868876 0.0034215630 -0.0000718139 -0.0029205465 0.0009290310 -0.0016735456 0.0019796761 -0.0014444602 0.0012085898 0.0033745553 0.0005483760 0.0017842247 0.0005498402 0.0033804261 0.0000786705 0.0000238889 -0.0003635416 0.0012064003 -0.0039808876 -0.0001625596 -0.0066828580 -0.0048494960 0.0093807018 0.0128013133 0.0085158464 -0.0032578427 0.0135892529 -0.0012434427 0.0008351276 0.0005142708 -0.0191294965 0.0130077238 0.0161204213 0.0074832253 0.0071819959 -0.0078579716 -0.0110152772 -0.0292263352 0.0237284032 -0.0945451830 0.0348234934 0.0481071631 -0.1982921392 0.0302080771 0.0908427031 0.1476008392 -0.0399110212 -0.0755266845 -0.0890161191 0.0029531622 0.0514867059 0.0704142570 0.0294387069 -0.0310074366 0.0524166613 -0.0474207205 0.0275537851 -0.0747508239 0.0245623411 -0.0466551552 0.1423514924 -0.0087328406 0.0683397137 -0.0965702145 -0.0011939608 -0.0444393854 -0.1844133842 0.0344043709 -0.0793798733 -0.0013306854 0.0035697269 -0.0020847174 -0.0023895231 -0.0033343717 0.0024161479 -0.0035686265 0.0005732963 -0.0002411667 0.0019993325 -0.0018457965 -0.0011002827 0.0022853035 0.0015604044 0.0014241575 -0.0027185219 0.0025647698 0.0084921619 0.0014991097 0.0004930894 -0.0019157779 -0.0015064311 -0.0017595997 -0.0000390114 0.0014246600 0.0018359179 0.0001173219 0.0016325750 0.0028903244 0.0014824490 0.0003057043 0.0010943299 0.0010758731 -0.0009067982 -0.0020702454 -0.0013484776 -0.0019099929 -0.0027407828 -0.0007728687 -0.0012320791 -0.0032633472 -0.0027801582 0.0013177018 0.0006342402 -0.0012662329 0.0005136904 0.0021122107 0.0009850790 0.0000787030 -0.0009022658 -0.0011613645 -0.0003850141 0.0008129453 0.0014555796 0.0023258035 -0.0014187345 -0.0023801045 0.0000957266 -0.0005475389 -0.0024312599 -0.0001302551 0.0002295483 0.0012087288 -0.0006227806 0.0002260059 0.0026758751 0.0006311581 0.0011531771 0.0030117046 0.0006004004 -0.0003171306 -0.0029124553 -0.0004710918 -0.0008388456 -0.0021674574 0.0014978746 0.0007308665 -0.0023565228 -0.0030003489 -0.0024074964 -0.0041280637 -0.0022643322 -0.0006310666 0.0034072540 0.0017054574 0.0011195091 0.0014109781 -0.0000630014 0.0002038211 0.0015060446 0.0004944342 0.0005607771 -0.0003777199 0.0006899614 0.0010994084 0.0027406416 0.0238733607 -0.0076877287 0.0151158536 0.0002263731 -0.0002199615 -0.0002571196 -0.0003821773 0.0001365976 0.0004560783 0.0000243252 -0.0000741047 -0.0000824443 -0.0001351766 -0.0000336792 -0.0000671986 0.0000419392 -0.0002369970 0.0001791137 0.0000218038 -0.0001057600 0.0000983064 0.0000978024 -0.0000303221 0.0000056753 0.0002131126 0.0000271568 -0.0001199123 -0.0000414031 0.0000358778 0.0000694760 0.0009311168 0.0022668787 -0.0001111681 0.0000558130 0.0000022538 -0.0022465452 -0.0006018703 0.0009364343 0.0008525097 -0.0000825456 0.0009671002 -0.0024821773 -0.0008177043 0.0017258956 0.0006762640 0.0009535133 -0.0002977178 0.0012939766 -0.0003661828 -0.0000047001 0.0003466976 0.0001728928 0.0000823578 -0.0002842896 0.0000183814 0.0003002772 0.0002009011 -0.0001542845 0.0000100756 -0.0001379184 0.0000728075 -0.0001418907 -0.0000158227 -0.0001109286 0.0000968355 0.0000241399 0.0209062361 -0.0027116467 -0.0165354016 -0.0050973557 0.0014063364 0.0035659219 0.0044239007 -0.0006193742 -0.0053577104 0.0008007096 0.0031426223 0.0051833278 -0.0033447343 -0.0026262996 -0.0025859106 -0.0022914235 0.0024416217 0.0068280210 0.0107167463 0.0019118150 0.0108484296 -0.0061402219 -0.0006728187 0.0045234830 0.0012010062 0.0019427062 0.0144651901 0.0038175225 0.0011967491 -0.0005918434 0.0076018880 0.0008755106 0.0013178361 -0.0090145587 0.0038929838 -0.0021317098 0.0071522217 -0.0027723743 0.0055589102 -0.0014987634 -0.0008140664 -0.0037501182 0.0010710376 -0.0001583556 0.0019198011 -0.0067006620 0.0010718797 -0.0084825951 0.0124818727 -0.0074557352 -0.0125279948 -0.0060778294 0.0015320296 -0.0066608910 -0.0011424703 -0.0032246312 -0.0156848343 0.0007820502 0.0007429494 0.0020460003 0.0104567642 -0.0029775953 0.0031496778 0.0021880057 -0.0002809610 -0.0077586381 -0.0035136924 -0.0014409826 -0.0045132692 0.0031943019 0.0000831828 0.0081751106 -0.0025231398 0.0027738093 0.0049544727 -0.1716448989 0.0478677826 0.0964511057 0.1412999740 -0.0385581863 -0.0869339413 0.1925780661 -0.0205367830 -0.1105870557 -0.1298109467 -0.0297031561 0.0716301599 -0.2050309342 0.0858861136 0.1193276470 0.0186137379 0.1847081248 0.0060021079 -0.1759628561 0.0835098262 0.1137924242 0.1063232674 -0.1135228499 -0.0735175870 0.2224159404 -0.0064005528 -0.1424706801 0.0440253912 0.1989609008 -0.0105662825 0.1325797477 -0.0077963257 0.0782212194 -0.1631946008 0.0090358970 -0.0863551609 -0.1783183255 -0.0197823308 -0.1041437204 0.1266493963 0.0672118142 0.0685480562 0.2000516541 -0.0639409835 0.1303923255 -0.0202355990 -0.1866905680 0.0053245242 0.1729291199 -0.0397574280 0.0984113719 -0.1040825880 0.0636973150 -0.0628816719 -0.2021891775 -0.0119464930 -0.1066157573 -0.0377034586 -0.1649506033 -0.0095991586 0.0000166462 0.0000341749 0.0000119441 -0.0001297659 0.0001234714 -0.0001146601 -0.0002137882 -0.0000857532 -0.0000773892 0.0000563376 0.0000361994 0.0000350191 0.0000604850 -0.0000236837 0.0001051362 0.0009076202 0.0002970814 0.0000377001 -0.0015563927 0.0014317651 0.0001304174 -0.0014736657 -0.0006896936 -0.0016420839 0.1033930456 -0.0410243108 -0.0545090652 0.1980643942 -0.0274913305 -0.0886005467 -0.1536141351 0.0427781747 0.0788693839 0.1267593934 -0.0106488302 -0.0536293242 -0.0885924531 -0.0261413409 0.0369485547 0.0841767513 -0.0613777293 0.0403234335 -0.1319609920 0.0386579878 -0.0583865734 0.1782721666 -0.0097295173 0.0857247982 -0.1278342424 -0.0042936524 -0.0605120340 -0.2196398073 0.0439454110 -0.0924685298 -0.0024287067 0.0051916077 -0.0041561128 0.0031698912 0.0039662906 -0.0037703245 -0.0007125741 -0.0028251809 0.0040893114 0.0002052815 0.0004122717 -0.0011671114 0.0003711223 0.0006956082 -0.0011869648 0.0011573384 -0.0006415847 -0.0011485878 0.0010592935 0.0007652897 -0.0008220048 -0.0010351937 -0.0009449136 0.0003880136 0.0010706780 0.0007710872 -0.0005042677 0.0007971396 0.0010716824 0.0002439721 0.0005078064 0.0003811993 -0.0003205173 -0.0006258903 -0.0007925280 -0.0001431018 -0.0010046331 -0.0009203291 0.0004715228 -0.0002609634 -0.0010314655 -0.0013440856 0.0002688820 0.0006536989 0.0003592196 0.0007324936 0.0010009292 0.0013619523 -0.0004145821 0.0001077538 0.0002664411 0.0001607014 -0.0001502326 -0.0002016094 0.0000152477 -0.0003930465 0.0002228088 0.0002244656 0.0001998149 0.0001436368 -0.0000315346 -0.0000604470 -0.0000364400 -0.0001344241 -0.0001061260 -0.0001066078 -0.0001873269 -0.0002097921 -0.0003395894 0.0000132991 0.0001029961 0.0002548677 0.0001036378 0.0000760434 0.0001920863 0.0002886219 -0.0005024141 -0.0005796589 0.0003868511 0.0000331244 0.0005352161 0.0003343653 -0.0000853835 0.0000382065 -0.0003388711 0.0003419706 -0.0003208142 0.0002139817 0.0001858311 -0.0001195158 0.0004158009 0.0003924759 -0.0001850120 -0.0040716619 -0.0026762659 0.0019472274 0.0326223320 -0.0102428446 0.0200417781 0.0000949907 -0.0000579516 -0.0000761945 -0.0000762181 0.0000335563 0.0000771750 0.0000180547 -0.0000060790 0.0000247087 -0.0000817613 -0.0000733736 -0.0000926216 -0.0000058053 -0.0003921376 0.0002776859 -0.0001019755 -0.0001169116 -0.0001718227 0.0000289004 -0.0000199937 0.0000189163 0.0000200987 0.0000050723 -0.0000084398 0.0000080138 -0.0000029051 -0.0000123291 0.0017838767 0.0037259825 0.0001326241 0.0000256084 0.0000467484 -0.0039016193 -0.0010614766 0.0016951335 0.0013728765 0.0001916160 0.0005401709 -0.0003231603 0.0005241187 0.0018809359 0.0005572453 0.0011574173 -0.0004222211 0.0026607672 -0.0003362778 -0.0000561462 0.0004671020 0.0001232793 0.0001067877 -0.0002656774 0.0001377115 0.0003743719 0.0002508838 -0.0000075742 0.0000069937 0.0000495553 -0.0000578137 0.0000418267 0.0000265668 0.0000060135 -0.0000001077 0.0000102689 -0.0245123093 0.0031360320 0.0187755863 0.0082233849 -0.0002518467 -0.0038863947 -0.0068377843 -0.0000793749 0.0061219366 0.0006038176 -0.0019629118 -0.0037920674 0.0014694234 0.0014043201 0.0019865047 0.0041599698 -0.0022984257 -0.0082079055 -0.0144278742 -0.0045254718 -0.0131855284 0.0072053645 -0.0005249084 -0.0071549795 -0.0027889154 -0.0037030963 -0.0238939926 -0.0014266494 -0.0001897847 0.0009165014 -0.0089406936 -0.0008549442 0.0001029884 -0.0136674139 0.0067773007 -0.0023783389 0.0104948960 -0.0047728048 0.0067344471 -0.0026690823 0.0007935077 -0.0020061005 0.0026926840 -0.0018833119 0.0011487452 -0.0095956578 0.0019727699 -0.0111622787 0.0183461092 -0.0124894061 -0.0177366562 -0.0078720576 0.0007673978 -0.0105168157 -0.0009999036 -0.0070371414 -0.0297961801 -0.0013598358 0.0024157416 0.0024960087 0.0134235962 -0.0037693384 0.0047955496 -0.0032813497 0.0005735058 0.0123545181 0.0058669807 0.0024981962 0.0076140751 0.0055455671 0.0003439904 0.0148137784 -0.0050153738 0.0055780401 0.0098200598 0.1646628430 -0.0351653540 -0.0917167845 -0.1414728252 0.0295643807 0.0841048607 -0.1685055763 0.0168358971 0.0966703684 0.1120689381 0.0300805205 -0.0613708416 0.1806612374 -0.0761498978 -0.1057596458 -0.0172155040 -0.1559837452 -0.0039049461 0.1522359356 -0.0657006560 -0.0978132732 -0.0884068974 0.0879848383 0.0605866314 -0.1894221011 0.0129835956 0.1282565779 -0.0407553154 -0.1567450315 0.0111712666 0.1544181698 -0.0201065832 0.0890596543 -0.1825513757 0.0226967783 -0.0973319781 -0.1793753118 -0.0126981742 -0.1051257780 0.1215571859 0.0587234139 0.0663050779 0.2029743917 -0.0560581882 0.1421751667 -0.0119024553 -0.1747745661 0.0078748914 0.1784476308 -0.0423365560 0.1016378954 -0.1045041948 0.0697319231 -0.0634333738 -0.2110628363 -0.0128977419 -0.1119521750 -0.0359037391 -0.1648649224 -0.0082524959 -0.0000123996 0.0000029384 -0.0000022685 0.0000257018 -0.0000727012 0.0000054797 0.0000323140 0.0001410336 0.0001033687 0.0000527762 -0.0000540974 0.0001262746 0.0000107342 0.0000032940 -0.0000316524 -0.0000214587 0.0005244800 0.0004290190 -0.0001605329 0.0004084165 -0.0001749204 -0.0003849773 -0.0005903907 0.0002981179 0.0004713494 -0.0032939454 -0.0020743622 -0.0013046550 0.0024736962 -0.0011208596 0.0006816575 0.0016118208 0.0001078508 -0.0026935099 -0.0000443344 0.0001606161 0.0005414505 0.0009850577 0.0001575690 -0.0150164361 0.0032405207 -0.0080404248 0.0151851612 -0.0032751813 0.0072980679 -0.0231072818 -0.0072478292 -0.0124060825 0.0264903217 0.0146781264 0.0206429999 0.0174429432 -0.0156968285 0.0160036826 0.0008805328 -0.0005496790 0.0011388977 -0.0000207311 0.0000536125 0.0001003259 0.0007328718 -0.0003424259 -0.0009097642 -0.0009172117 0.0010651686 0.0008897631 -0.0002178568 -0.0000713173 0.0003376213 -0.0084428323 0.0094120250 0.0124920077 -0.0036989659 -0.0023652578 0.0025772309 0.0035948120 0.0033313595 -0.0012962939 -0.0043631419 -0.0024623379 0.0023283373 -0.0027479809 -0.0040462160 -0.0011935542 -0.0019142562 -0.0014668546 0.0012963518 0.0026838791 0.0030122214 0.0003978197 0.0037155866 0.0038412203 -0.0007632950 0.0006316582 0.0040787634 0.0041305143 -0.0008324426 -0.0025793340 -0.0023629443 -0.0056033489 -0.0032149696 -0.0074440725 0.0040323907 -0.0022800547 -0.0033702497 -0.0032619651 0.0028293530 0.0030019414 0.0017943106 -0.0011039284 -0.0033632810 -0.0010689225 -0.0016425205 -0.0021845107 -0.0000698058 0.0003544456 0.0005110522 0.0004916759 0.0005294768 0.0014495065 0.0014170635 0.0017769726 0.0025189355 -0.0000180279 -0.0003602554 -0.0019121738 -0.0006025906 -0.0005304519 -0.0014717580 -0.0013135243 0.0033349037 0.0021261909 -0.0014619995 -0.0039564545 -0.0044959768 -0.0004290389 -0.0024716117 0.0009839076 0.0023223736 -0.0019214750 0.0019464661 -0.0007137396 -0.0014866532 0.0011467181 -0.0011238413 -0.0013626103 0.0001514719 0.0029428967 0.0038016244 -0.0019595591 -0.0145056892 -0.0576581524 -0.1208394295 -0.0015001003 0.0009731306 0.0034276127 0.0010947577 -0.0046750560 -0.0060382920 0.0011755110 0.0031578789 0.0029576030 -0.0022104760 -0.0022233161 -0.0021475208 0.0009013155 -0.0078843701 0.0062455074 -0.0008096923 -0.0017570776 -0.0038441605 0.0009722034 -0.0003483728 0.0004951195 -0.0002591498 0.0004549806 0.0006804777 0.0001706874 -0.0001075464 -0.0001819012 0.0331293948 0.0723289138 0.0002879807 -0.0078720920 0.0020698469 -0.0822447790 -0.0206466848 0.0371433236 0.0258757215 -0.0021336889 0.0003231627 -0.0047740851 0.0120642639 0.0375700594 0.0110902410 0.0164709975 -0.0052003763 0.0601988560 -0.0085847110 -0.0006645824 0.0090631945 0.0029515425 0.0026541181 -0.0061674871 0.0025210529 0.0070094663 0.0050212670 -0.0021333601 -0.0013221139 -0.0022730565 -0.0005605058 -0.0029144952 -0.0004080704 -0.0014177995 0.0016396810 0.0021284126 0.0027108216 0.0139908473 0.0212333280 -0.0127621869 -0.0131156027 -0.0121952860 -0.0017876085 0.0119584598 0.0234250983 -0.0059685297 -0.0271082069 -0.0504822791 0.0097320404 0.0159198925 0.0208878300 0.0066723785 -0.0067553306 -0.0168843006 0.0286871974 0.0110182417 -0.0037785060 0.0297724196 0.0161450643 0.0028338825 0.0215000770 0.0270567042 0.1469883934 -0.0312950149 -0.0029741481 0.0166193352 -0.0262953260 -0.0072187696 0.0092990762 -0.0390952272 0.0692087083 0.0718261170 -0.0332405215 -0.0408889893 -0.1269852786 0.0149338421 0.1179022301 0.2670928454 0.0211710540 -0.0742499776 -0.1143784905 0.0493768296 0.0122642361 0.0930754238 0.1209279156 -0.0858106714 0.0139752902 0.1270633444 -0.1132745156 -0.0240640659 0.0038328541 -0.1821509106 -0.6665244461 -0.1415874344 0.0546091252 -0.0816053320 -0.1264482143 0.0729328627 -0.0417723774 0.0168260393 -0.0044025114 -0.0705535925 -0.0344879188 -0.0158385174 -0.0478658072 0.1051469746 0.0136476921 0.3027846584 -0.1097379944 0.1282851719 0.2299748564 -0.0022526020 -0.0014031826 0.0012196343 0.0021082904 0.0015544637 -0.0009301635 0.0026950362 0.0003558398 -0.0014831502 -0.0020327784 -0.0013583900 0.0010208038 -0.0027213545 0.0018400048 0.0017748532 0.0007727612 0.0024679770 -0.0002625794 -0.0014100386 -0.0000212819 0.0008243539 0.0007614520 0.0002235883 -0.0004236977 0.0011006655 -0.0007040753 -0.0009909353 0.0007350284 0.0008777780 -0.0004212938 -0.0115310458 -0.0046338551 -0.0063102570 0.0116796577 0.0042613498 0.0052615117 0.0084350652 0.0014494993 0.0049081063 -0.0053187707 -0.0048348926 -0.0027396903 -0.0108977612 0.0034429155 -0.0076229614 0.0011966716 0.0060636648 0.0001325151 -0.0041542646 -0.0016773495 -0.0022129869 0.0014313421 0.0021707748 0.0007510058 0.0045464581 -0.0027647884 0.0019979250 0.0023621862 0.0007890969 0.0010592993 -0.0002748037 -0.0001148556 -0.0002184897 0.0004015017 0.0003995853 0.0019514620 0.0017885066 -0.0008327159 -0.0025465588 -0.0003078414 0.0017590638 -0.0026539574 -0.0004280322 -0.0002886096 -0.0004261490 0.0060060876 0.0024404603 -0.0003983459 0.0000970557 0.0002378890 -0.0004449750 0.0022545938 0.0028618194 -0.0015465991 -0.0164097567 0.0216894929 0.0176558633 -0.0171324855 -0.0084104612 0.0147188219 0.0169162666 -0.0128599262 -0.0107911172 -0.0148794454 0.0021867502 0.0066849649 0.0137078542 -0.0021237073 -0.0071801441 -0.0064733902 0.0022571895 -0.0032212813 0.0085110320 -0.0023826363 0.0031502836 -0.0093836686 -0.0012823942 -0.0047924500 0.0091006323 0.0034777821 0.0061446487 0.0086508761 -0.0044100655 0.0053295543 0.0006074206 -0.0000256475 0.0006594099 -0.0008501087 -0.0002261907 0.0012014412 -0.0004093200 -0.0007012468 -0.0016619988 -0.0004216626 0.0007439332 0.0009301811 0.0014251154 0.0017943300 0.0017047878 0.0438048632 -0.0405331655 -0.0620013610 0.0138593066 0.0101581612 -0.0090050438 -0.0129893868 -0.0116625438 0.0054734948 0.0161869824 0.0079187842 -0.0095030546 0.0093806380 0.0129384923 0.0030318111 0.0076683643 0.0050459701 -0.0063727198 -0.0104050502 -0.0105161506 -0.0001681292 -0.0122829488 -0.0115883037 0.0039987038 -0.0014889151 -0.0109309758 -0.0138678785 0.0017372736 0.0105280962 0.0116037951 0.0240070841 0.0116949278 0.0310611170 -0.0151014526 0.0090617928 0.0147201814 0.0106862428 -0.0091942701 -0.0156205032 -0.0102931681 -0.0029784503 0.0240498170 0.0027437483 0.0043885051 0.0069680747 0.0014530110 0.0000320682 0.0000011586 -0.0017688017 -0.0013044939 -0.0031942566 -0.0038105205 -0.0042625930 -0.0067426154 -0.0005147686 0.0012704090 0.0051904097 0.0012139763 0.0006559262 0.0033877887 0.0111845659 -0.0150784089 -0.0148498977 0.0038933049 0.0040691982 0.0086455149 0.0019582959 0.0017620806 0.0002305601 -0.0077267637 0.0116141781 -0.0047888118 0.0015841969 0.0038011843 -0.0015919135 0.0034075655 0.0036137493 -0.0010986518 -0.0122440620 -0.0092135949 0.0098526437 -0.0038944023 -0.0122754008 -0.0265806615 -0.0033415717 0.0025828259 0.0062873557 0.0031356578 -0.0066390880 -0.0103706955 0.0012892246 0.0039943946 0.0039029046 -0.0005524575 -0.0006032654 -0.0007182130 0.0002527366 -0.0015915255 0.0015091380 -0.0001352255 -0.0006356408 -0.0006872382 0.0002135172 -0.0001347325 0.0002114835 -0.0012797927 0.0004514793 0.0013992397 0.0003676639 -0.0006351248 -0.0010577035 0.0064021692 0.0140745528 -0.0000075154 -0.0021945476 0.0004657841 -0.0169181112 -0.0039772225 0.0073182392 0.0050706585 -0.0007225009 0.0006951251 -0.0021052588 0.0026875743 0.0096592115 0.0030182008 0.0034430718 -0.0012861727 0.0133353492 -0.0014284287 -0.0002390010 0.0018223472 0.0006284009 0.0001296597 -0.0014273050 -0.0001193367 0.0018042956 0.0013384244 0.0000426028 -0.0005642197 0.0023325100 -0.0028752261 0.0018229757 0.0008389580 -0.0005450328 0.0002952955 0.0019238166 -0.0093143008 -0.0659137090 -0.1018196879 0.0585316001 0.0613052776 0.0576001788 0.0091588010 -0.0559550958 -0.1103062594 0.0275079471 0.1268881562 0.2367424246 -0.0450520147 -0.0742517880 -0.0979231033 -0.0321550699 0.0318313194 0.0801549592 -0.1330020135 -0.0505512216 0.0189086099 -0.1402487987 -0.0749387156 -0.0130097403 -0.1007160091 -0.1272680277 -0.6915046342 0.1465000926 0.0126094144 -0.0778259033 0.1249522814 0.0332415700 -0.0440338685 -0.0082223217 0.0148705631 0.0155890800 -0.0073017063 -0.0087842452 -0.0275234881 0.0032635456 0.0254792558 0.0577959642 0.0044847265 -0.0159622903 -0.0247484770 0.0108732949 0.0026133232 0.0203347265 0.0258999688 -0.0183227185 0.0032826323 0.0276280701 -0.0244467661 -0.0051433920 0.0009164109 -0.0396552940 -0.1449525770 -0.0305835115 0.0114549351 -0.0177003109 -0.0277738700 0.0157132889 -0.0091331193 -0.0793374790 0.0208153728 0.3321152483 0.1621363144 0.0745246388 0.2252122895 0.0228608269 0.0029809375 0.0658396338 -0.0239199886 0.0279329776 0.0500815510 -0.0089770404 0.0070064681 0.0049006118 0.0091703886 -0.0072496494 -0.0059766296 0.0036695336 -0.0025986157 -0.0023079016 -0.0010821753 0.0019570333 0.0008985533 -0.0052445036 -0.0006547565 0.0021545358 -0.0016382969 0.0019664221 0.0008110657 -0.0071391427 0.0037650274 0.0046825773 0.0033211171 -0.0056743727 -0.0024959590 0.0103843604 -0.0004977585 -0.0071677616 0.0008499162 0.0057926037 -0.0001419971 -0.0060671320 0.0001871983 -0.0033639708 0.0063067539 -0.0002340224 0.0032068702 0.0046521140 0.0001143397 0.0027387828 -0.0027542304 -0.0015009456 -0.0014809041 -0.0055821720 0.0011042828 -0.0041664014 0.0001177840 0.0035061964 -0.0003286711 -0.0040049078 0.0004943659 -0.0022466368 0.0020142213 -0.0009860454 0.0012241685 0.0048285885 -0.0003283839 0.0024399898 0.0009930454 0.0028091155 0.0002127619 -0.0001444721 -0.0001176342 -0.0010053408 0.0029680839 -0.0032844436 0.0029799618 0.0019503001 0.0029021335 0.0017477477 -0.0018707197 -0.0039640725 0.0006245877 0.0003942462 0.0000914549 -0.0009012196 0.0014660714 0.0022579869 0.0011565598 -0.0013392911 -0.0000989538 -0.0000571861 0.0013564012 -0.0003641199 0.0013651710 0.0000176091 -0.0000141891 -0.0000074280 0.0000553058 0.0001228127 -0.0000143029 -0.0000109439 -0.0000166078 0.0000009572 0.0000190207 -0.0000084410 -0.0000107002 -0.0000760938 0.0000657290 0.0000638562 -0.0001171255 -0.0000604841 -0.0000495735 0.0000211571 0.0000008229 0.0000143642 -0.0000035798 0.0000210845 -0.0000018688 0.0000029480 0.0000105544 0.0000086673 0.0000098328 -0.0001911788 -0.0000018763 0.0001387670 0.0000057735 -0.0000608633 0.0001483282 -0.0001772928 -0.0000332049 -0.0001682309 0.0003553808 0.0002434487 0.0001412126 -0.0003375390 -0.0001241138 -0.0000659458 -0.0002254964 -0.0001633516 -0.0035423607 -0.0015742163 -0.0013824475 -0.0000083009 0.0000936073 0.0001591184 0.0000154573 0.0000040444 -0.0000183098 -0.0000331613 -0.0000323828 -0.0000047463 -0.0000289510 -0.0000450873 -0.0000184411 -0.0000099005 -0.0000057515 0.0000072234 -0.0000095492 0.0000017102 0.0000060902 0.0000744942 0.0000862957 -0.0000083801 0.0000420021 0.0000494022 0.0000031005 -0.0000095776 -0.0000262409 0.0000041315 0.0000774047 -0.0000023953 -0.0000930492 0.0002306193 0.0001610960 0.0001541123 0.0000512205 -0.0001301160 -0.0000283493 0.0003823451 0.0004395638 0.0001174329 -0.0000680362 -0.0000282952 0.0000233952 -0.0000189262 0.0000040687 0.0000127136 0.0000008148 -0.0000083276 -0.0000331225 0.0003946687 0.0001774186 -0.0003210040 -0.0001913822 -0.0000675960 -0.0000945031 0.0000086972 0.0000070722 0.0000205064 0.0000614310 0.0000374179 0.0000577002 -0.0034846800 -0.0010418668 0.0035418885 0.0020271000 0.0019180781 0.0010017419 -0.0000049411 -0.0000368217 0.0000154388 0.0000054608 -0.0000576013 -0.0001421762 0.0001457252 0.0001830424 0.0005873544 -0.0023291574 -0.0030345821 -0.0085827109 0.0000029134 -0.0000256595 -0.0000134696 -0.0001149527 0.0000736314 0.0000089294 0.0000097012 -0.0001389893 -0.0001934661 0.0000565825 0.0001660218 0.0001186740 0.0009557362 -0.0003392057 -0.0000039064 -0.0002939871 0.0007160450 -0.0003111854 -0.0475305726 -0.0089050603 -0.0183325419 -0.0059174000 0.0048139025 0.0070627433 -0.0000222553 0.0000034701 0.0000220989 -0.0000085817 0.0000269925 0.0000229718 -0.0030431516 0.0012716297 0.0028781138 -0.0006678042 -0.0107196222 -0.0009189227 0.0056898297 0.0019133279 0.0022803217 0.3952313044 -0.3046530615 -0.2780287214 -0.0202150953 -0.1617246909 0.4899203702 0.1693990098 0.5776500431 -0.0021655080 -0.0302865643 -0.1164830952 -0.0248835460 0.0976468739 0.0019147559 0.0435644098 0.0011200668 0.0598659234 -0.0988074314 0.0001915410 -0.0009733346 0.0001458955 -0.0003968243 0.0000790089 -0.0006104143 0.0002727418 0.0002370604 0.0000311192 0.0000070647 0.0000071049 -0.0000046340 -0.0000047287 -0.0000009463 0.0000036799 0.0000024107 -0.0000005973 -0.0000032404 -0.0000101589 -0.0000031991 0.0000008751 0.0000072211 0.0000025816 -0.0000006246 -0.0000122613 -0.0000081984 -0.0000022083 0.0000140405 0.0000098294 -0.0000200729 0.0000005490 -0.0000055178 -0.0000077243 0.0000213063 0.0000030401 -0.0000116431 0.0000101970 -0.0000114866 0.0000037808 0.0000916291 0.0001205952 0.0000362141 0.0000037396 -0.0000078540 0.0000163132 -0.0000357662 -0.0000050880 0.0001091910 0.0000023557 -0.0000609639 0.0000094224 0.0000279582 -0.0000111386 -0.0000079226 -0.0000067201 0.0000270381 0.0000177277 -0.0001159278 -0.0000135954 -0.0004817628 -0.0009701321 -0.0005164761 0.0000114022 -0.0000696452 0.0000386483 0.0000156858 0.0000162735 -0.0000460097 -0.0000218991 0.0000185178 -0.0000897135 -0.0000268939 -0.0000083338 0.0000004313 0.0000091325 -0.0000077622 -0.0000011183 0.0000002916 0.0000136363 0.0000059566 -0.0000086152 -0.0000174593 -0.0000944564 0.0000138402 0.0000025972 -0.0000033719 -0.0000014187 -0.0000053054 0.0000085789 0.0000027854 -0.0000031087 -0.0000066906 0.0000011410 0.0000060312 -0.0000054120 -0.0000041534 0.0000220399 0.0000976102 -0.0000062357 -0.0000346857 0.0000383626 0.0000186244 0.0000029791 -0.0000010302 -0.0000019858 0.0000073031 0.0000033153 -0.0000038056 -0.0000216595 -0.0000219533 0.0000047455 -0.0000740556 -0.0000306343 0.0000389693 -0.0000090624 -0.0000055176 -0.0000054554 0.0000047889 0.0000033716 0.0000027094 0.0000034958 0.0000012796 0.0000019793 0.0000051569 -0.0000052385 0.0000033109 -0.0000119611 0.0000150959 -0.0000079073 -0.0000491448 0.0000466907 -0.0000375646 -0.0000012698 0.0000109674 -0.0000010910 0.0000082469 0.0000031982 0.0000048727 -0.0000103422 -0.0001436541 -0.0000039952 -0.0000450703 -0.0000263082 -0.0000265875 0.0005280009 -0.0001450092 0.0010238178 -0.0062257519 -0.0046483223 0.0025426813 -0.0054352886 0.0111905216 -0.0106579775 0.0054583463 -0.0049642540 -0.0037452012 0.0011866509 0.0016350159 -0.0002656936 0.0039605022 -0.0170582260 0.0173403498 -0.0085437085 -0.0106435084 -0.0185126156 -0.0081559403 0.0091365767 0.0047020137 0.0000041719 -0.0000033504 -0.0000018734 0.0000152465 0.0000394312 -0.0000033536 -0.0000030487 -0.0000048711 0.0000003347 0.0000049028 -0.0000015429 -0.0000030129 -0.0000180393 0.0000152830 0.0000152399 -0.0000272288 -0.0000138701 -0.0000113924 0.0000048625 0.0000003799 0.0000033504 -0.0000009296 0.0000035445 -0.0000010524 0.0000007540 0.0000031186 0.0000021322 -0.0000002433 -0.0000372845 -0.0000013558 0.0000319289 -0.0000001799 -0.0000134977 0.0000347875 -0.0000422652 -0.0000073109 -0.0000379844 0.0000838748 0.0000558630 0.0000374747 -0.0000838957 -0.0000304178 -0.0000177054 -0.0000540953 -0.0000378588 -0.0010734670 -0.0004714837 -0.0004351882 -0.0000042464 0.0000156362 0.0000226662 0.0000032684 0.0000032329 -0.0000043108 -0.0000002343 -0.0000194281 -0.0000054941 -0.0000098489 -0.0000113523 -0.0000028716 -0.0000021718 0.0000016415 0.0000063792 0.0000064263 -0.0000082378 -0.0000004867 0.0000292881 0.0000229588 0.0000023858 0.0000281247 0.0000221169 -0.0000218747 -0.0000111609 -0.0000074915 -0.0000011341 -0.0000248923 0.0000009055 0.0000099636 0.0000586856 0.0000564787 0.0000543742 0.0000315337 -0.0000712649 0.0000016364 0.0002294963 0.0002042372 0.0000408217 -0.0000113772 0.0000009883 0.0000028158 0.0000030169 -0.0000087533 -0.0000142191 -0.0000087667 -0.0000083904 -0.0000108579 0.0000931762 0.0000442254 -0.0000788105 -0.0000435898 -0.0000183133 -0.0000153569 0.0000027179 0.0000004320 0.0000078648 0.0000829118 0.0000551998 0.0000407202 -0.0008544097 -0.0002419694 0.0008379742 0.0004267045 0.0003977185 0.0001962363 0.0000217599 0.0000006454 -0.0000080937 -0.0000202227 0.0000541675 0.0001218925 0.0000286239 0.0000350703 0.0001269783 -0.0005389797 -0.0006292254 -0.0018660396 -0.0000011852 -0.0000037100 -0.0000027169 0.0000069487 0.0000491924 0.0000067015 0.0000978403 0.0000638824 0.0000608165 -0.0000712680 -0.0001728897 -0.0000567212 -0.0005620939 0.0004004198 0.0007386580 -0.0010952162 0.0014555059 -0.0021308222 -0.0098039703 -0.0013877414 -0.0036212035 0.0321441513 -0.0217111992 -0.0327674427 -0.0000517166 0.0000065808 0.0000400106 -0.0000838281 0.0004125629 0.0002928013 -0.0146893086 0.0067402759 0.0110714884 -0.0018993767 -0.0325573661 -0.0020558939 0.0305984263 0.0084272345 0.0135923378 0.0851043507 -0.0644897232 -0.0586723225 -0.0041724709 -0.0327624811 0.0992816239 0.0331075998 0.1139834738 -0.0004665537 0.1408730886 0.5482713103 0.1175043297 -0.4997704651 -0.0092508858 -0.2236255441 -0.0062513788 -0.2901415089 0.4810400982 0.0017520083 -0.0064520898 0.0006808619 -0.0027187055 0.0001781922 -0.0046394793 0.0025154816 0.0020089870 0.0001130687 0.0000018361 0.0000015670 -0.0000010868 -0.0000015072 0.0000000332 0.0000014138 0.0000002717 -0.0000005550 -0.0000012788 -0.0000028832 -0.0000005433 0.0000004531 0.0000017847 0.0000004400 0.0000000406 -0.0000031467 -0.0000020186 -0.0000006575 0.0000052913 0.0000002381 -0.0000117868 0.0000040763 0.0000021119 -0.0000005002 0.0000065559 0.0000010721 -0.0000021801 0.0000022813 -0.0000009127 0.0000003397 0.0000225374 0.0000310536 0.0000107963 0.0000028038 -0.0000024743 0.0000035655 -0.0000081980 -0.0000010179 0.0000210330 -0.0000023798 -0.0000133678 0.0000042744 0.0000046205 -0.0000021265 -0.0000031542 -0.0000001069 0.0000047556 0.0000036107 -0.0000312904 -0.0000078183 -0.0001120250 -0.0001917783 -0.0001108962 -0.0000109238 -0.0000079713 0.0000061362 -0.0000128560 0.0000128881 -0.0000032303 0.0000200521 -0.0000024095 -0.0000086810 0.0000023883 -0.0000025084 0.0000001048 0.0000021335 -0.0000028095 -0.0000005998 -0.0000002778 0.0000105744 0.0000074418 0.0000043887 -0.0000049601 -0.0000148432 0.0000047000 0.0000006483 -0.0000010149 -0.0000004315 -0.0000019421 0.0000019091 0.0000012181 -0.0000010729 -0.0000029538 0.0000003228 0.0000018268 -0.0000018858 -0.0000011294 0.0000075618 0.0000355328 -0.0000019299 -0.0000131040 0.0000117632 0.0000064158 0.0000009294 -0.0000008179 -0.0000007330 0.0000016718 0.0000010434 -0.0000008174 -0.0000057484 -0.0000022135 -0.0000003135 -0.0000174052 -0.0000085979 0.0000085482 -0.0000017845 -0.0000015112 -0.0000013036 0.0000010685 0.0000008894 0.0000008076 0.0000006477 0.0000004447 0.0000002435 0.0000028545 -0.0000023237 0.0000018060 -0.0000018463 0.0000011042 0.0000036631 -0.0000247244 0.0000206878 -0.0000175480 -0.0000004432 0.0000023890 -0.0000003256 0.0000029819 0.0000009285 0.0000016885 -0.0000031944 -0.0000356468 -0.0000013634 -0.0000182092 -0.0000123691 -0.0000108135 -0.0019324863 0.0005000754 -0.0035611827 0.0218206504 0.0161378163 -0.0088630453 0.0192884672 -0.0390913677 0.0376071695 -0.0185759820 0.0168898034 0.0128001492 0.0000582364 0.0000042829 0.0002323073 -0.0004497268 0.0010609427 -0.0012694666 -0.0004460065 -0.0007890464 -0.0011027544 0.0004011984 -0.0004069721 -0.0001401845 0.0000000224 -0.0000043764 -0.0000012354 -0.0000077993 0.0000084327 -0.0000001215 -0.0000003101 0.0000014335 0.0000017670 0.0000031493 -0.0000006132 -0.0000015574 -0.0000129649 0.0000099123 0.0000054000 -0.0000154020 -0.0000063752 -0.0000086092 0.0000036057 -0.0000015512 0.0000017259 -0.0000003437 0.0000020911 -0.0000008009 0.0000020827 0.0000016453 0.0000010869 0.0000004007 -0.0000179608 0.0000022278 0.0000253817 0.0000120924 -0.0000018804 0.0000160141 -0.0000080559 0.0000004668 -0.0000281902 -0.0000103646 -0.0000073070 0.0000168981 0.0000057167 -0.0000009431 0.0000441251 0.0000165805 0.0000007632 0.0041383798 0.0020605434 0.0017811823 0.0000119957 0.0001994053 0.0003600648 0.0000020095 -0.0000449964 -0.0000164922 -0.0001148233 0.0001744664 0.0000876315 0.0000353539 -0.0000000202 -0.0000206252 -0.0000176711 -0.0000619892 -0.0000734605 -0.0001084134 0.0001211275 0.0000323453 -0.0001288368 0.0000145906 -0.0000540028 -0.0002288784 -0.0001165961 0.0002791372 0.0002706077 0.0002189225 0.0000311097 0.0005989098 0.0000251796 -0.0004547087 -0.0000930673 -0.0003211083 -0.0003199712 -0.0003442072 0.0006963925 -0.0000961270 -0.0018216889 -0.0017947605 -0.0001809783 -0.0000124392 -0.0001030690 0.0000000569 0.0000069501 0.0000069929 0.0000184334 0.0000167990 0.0000115142 0.0000022532 -0.0000668950 -0.0000319802 0.0000447864 0.0000044048 0.0000095878 0.0000163333 -0.0000264769 0.0000000933 0.0000160927 0.0001772035 0.0000883638 0.0000565946 0.0006099097 0.0001580874 -0.0005260433 -0.0001945025 -0.0001395724 -0.0000568590 0.0002096675 0.0001262927 -0.0001463338 0.0000098854 -0.0000433786 -0.0000965993 0.0000795112 0.0000842434 0.0001715467 -0.0005994835 -0.0010590150 -0.0024566909 -0.0000008189 -0.0000007045 0.0000006024 -0.0006762590 -0.0005626538 -0.0001126568 0.0009875530 -0.0000513832 -0.0008729602 0.0000175618 0.0002486925 0.0002845127 -0.0000831056 -0.0000582183 0.0000397223 -0.0000012250 -0.0000778642 0.0002997212 0.0003526180 0.0001716938 0.0001758829 0.0024257349 -0.0015995144 -0.0025115627 -0.0003655555 -0.0002382878 0.0000107010 -0.0001777677 0.0002705599 0.0000624926 0.0030631770 -0.0012012139 -0.0024024124 0.0000891985 0.0034294948 0.0001740036 -0.0031113410 -0.0007146880 -0.0012204903 -0.0025044193 0.0020164650 0.0018873333 0.0001253798 0.0012606575 -0.0039321628 -0.0014351560 -0.0050626038 0.0000746097 0.0106146750 0.0415997807 0.0089634326 -0.0377399848 -0.0007177658 -0.0168748098 -0.0004485212 -0.0222119704 0.0366871181 0.0014882414 -0.0054364427 0.0009512518 -0.0013959478 0.0003437754 -0.0022462120 0.0020805050 0.0015911022 0.0001385849 -0.0000075714 -0.0000008753 0.0000023197 0.0000036561 -0.0000021564 -0.0000001693 0.0000031321 0.0000059198 0.0000057202 0.0000040446 0.0000002482 -0.0000005657 -0.0000007984 -0.0000028837 -0.0000019092 0.0000028437 -0.0000021744 -0.0000032678 -0.0000206212 0.0000166588 0.0000211083 -0.0000459374 -0.0000146891 -0.0000390669 -0.0000056073 0.0000063768 -0.0000011173 -0.0000290517 0.0000345199 -0.0000040290 -0.0000130538 0.0000089045 0.0000016866 -0.0000010765 0.0000006853 -0.0000029827 0.0000022594 -0.0000025730 -0.0000032684 -0.0000016804 0.0000011228 -0.0000030354 0.0000124989 0.0000016496 0.0000189146 -0.0000033691 0.0000039934 -0.0000005632 0.0000042488 -0.0000072184 0.0000212524 -0.0000136360 0.0000142150 0.0000304301 0.0000042648 -0.0000017132 0.0000268998 -0.0001045595 -0.0000326173 -0.0001529778 0.0000075221 -0.0000272249 0.0000022476 0.0000021913 -0.0000043961 -0.0000015227 0.0000022964 -0.0000051763 0.0000023790 -0.0000067639 0.0000005738 -0.0000140356 0.0000040023 -0.0000001292 -0.0000109254 -0.0000000562 -0.0000005154 -0.0000010199 -0.0000005708 0.0000014019 0.0000007148 -0.0000015473 -0.0000026497 0.0000003132 0.0000042787 -0.0000032141 -0.0000031146 0.0000049098 0.0000443774 -0.0000014844 -0.0000329859 0.0000328341 0.0000194133 0.0000001897 -0.0000005707 -0.0000004818 0.0000039182 0.0000011946 -0.0000025600 -0.0000039232 -0.0000071707 -0.0000024499 -0.0000336478 -0.0000155608 0.0000171283 -0.0000019351 -0.0000002444 -0.0000012798 0.0000005075 0.0000005509 0.0000003113 0.0000011422 0.0000008324 0.0000001030 0.0000017293 -0.0000017656 0.0000007048 -0.0000054531 -0.0000074855 0.0000005299 -0.0000172612 0.0000118649 -0.0000132919 0.0000000666 0.0000015443 -0.0000005402 0.0000023680 0.0000008556 0.0000008762 -0.0000026508 -0.0000247798 -0.0000006247 -0.0000159709 -0.0000112917 -0.0000102315 0.0271882316 -0.0072490437 0.0505473749 -0.3067543034 -0.2273231869 0.1244896921 -0.2733003581 0.5543063505 -0.5331362420 0.2632113945 -0.2396767526 -0.1815222595 0.0017031992 0.0020775590 -0.0019201284 0.0094279189 -0.0324126142 0.0342263606 -0.0104443887 -0.0105897745 -0.0217549939 -0.0184429495 0.0197594480 0.0099285052 0.0000004567 0.0000019672 -0.0000001206 0.0000076353 -0.0000006820 -0.0000032068 0.0000000535 -0.0000014804 -0.0000012308 0.0000001950 0.0000021269 0.0000003212 0.0000046479 -0.0000029604 -0.0000008322 0.0000058877 0.0000041245 0.0000045083 -0.0000014413 0.0000007403 -0.0000008792 0.0000001544 -0.0000046798 -0.0000014840 -0.0000025466 0.0000031866 0.0000009636 -0.0000166281 0.0000163075 -0.0000000898 -0.0000129713 -0.0000136007 0.0000029536 -0.0000068482 -0.0000043910 -0.0000025392 0.0000144671 0.0000311773 0.0000099830 -0.0000040292 -0.0000235915 -0.0000031410 -0.0000124995 -0.0000438698 -0.0000200484 -0.0017422823 -0.0009416317 -0.0004850040 0.0000079696 -0.0000078588 -0.0000192170 0.0000083948 0.0000083553 -0.0000001106 0.0000015565 -0.0000256697 -0.0000167303 -0.0000081961 -0.0000047573 -0.0000000274 0.0000009065 0.0000081973 0.0000109754 -0.0000035032 -0.0000061506 -0.0000065826 0.0000041703 -0.0000371508 -0.0000112872 0.0000192605 0.0000207839 -0.0000191563 -0.0000298048 -0.0000443318 -0.0000014664 -0.0000033421 -0.0000147081 0.0000200509 0.0000660970 0.0000776710 0.0000988215 0.0000935857 -0.0001868506 0.0000580571 0.0001561863 0.0002409592 -0.0000780868 0.0000039765 0.0000236978 -0.0000181785 0.0000024635 -0.0000014128 -0.0000087980 -0.0000148629 -0.0000060751 -0.0000015247 -0.0000333794 -0.0000203264 0.0000435356 -0.0000104453 -0.0000096034 -0.0000072102 0.0000013150 -0.0000021785 -0.0000020574 0.0000608846 0.0000465286 0.0000355557 0.0004592125 0.0001397721 -0.0002371999 0.0001150580 0.0001244398 0.0000450878 -0.0000183553 -0.0000234372 0.0000113860 -0.0000015516 0.0000149718 0.0000517883 0.0000472796 0.0000705662 0.0001817590 -0.0001758087 -0.0011147349 -0.0026201263 -0.0000075952 0.0000030134 -0.0000053233 -0.0001221083 -0.0000289051 -0.0000468232 -0.0000617013 0.0000399523 0.0002435482 -0.0001183099 -0.0001324947 -0.0000774555 0.0000954175 0.0004229539 -0.0008989169 0.0207936629 -0.0253819488 0.0420958986 -0.0009214467 0.0000535105 -0.0002174056 0.0015067829 -0.0008495156 -0.0017246567 0.0000390155 0.0000101493 -0.0000300591 0.0000794098 -0.0000862742 -0.0000812031 0.3075529622 -0.1339860380 -0.2558190205 0.0358299156 0.5867259384 0.0393457252 -0.5883129855 -0.1598931764 -0.2636083126 0.0078695007 -0.0055376255 -0.0052526502 0.0004449218 -0.0030615095 0.0100197826 0.0020534607 0.0076005153 -0.0002167813 0.0064341641 0.0248468706 0.0051262691 -0.0233217997 -0.0003784492 -0.0100142113 -0.0008629287 -0.0152091243 0.0262087504 -0.0006610490 0.0022096698 -0.0003101144 0.0009230308 -0.0002088310 0.0014698875 -0.0012621992 -0.0009220905 -0.0000436341 0.0000043491 0.0000011791 -0.0000010184 -0.0000012236 -0.0000013680 -0.0000036242 -0.0000001187 -0.0000011695 -0.0000025792 -0.0000024847 -0.0000002794 0.0000005863 0.0000015172 -0.0000000911 -0.0000016798 -0.0000020622 -0.0000004941 0.0000004466 0.0000000068 0.0000076250 0.0000301688 0.0000147662 -0.0000003827 0.0000130858 0.0000049300 0.0000004410 0.0000038619 -0.0000016455 -0.0000014504 0.0000195653 0.0000139481 0.0000087831 0.0000033692 0.0000065187 -0.0000017416 0.0000091571 -0.0000042532 -0.0000020696 0.0000038425 0.0000782537 0.0000129155 -0.0000348286 0.0000217214 0.0000061941 0.0000328379 0.0000024256 0.0000059802 0.0000042807 -0.0000409643 0.0000055961 -0.0000707074 -0.0000368197 0.0000254628 0.0000032315 -0.0001702221 0.0000207201 0.0002179273 -0.0003947105 -0.0001065988 -0.0002751588 -0.0000272362 0.0000229214 0.0000068289 -0.0000007271 0.0000001456 -0.0000017072 -0.0000029883 -0.0000000970 -0.0000031325 -0.0001035739 -0.0001013807 -0.0000760724 0.0000344138 -0.0000973990 -0.0000426928 0.0000000405 0.0000000356 0.0000002137 -0.0000015055 -0.0000009607 0.0000006174 0.0000009046 0.0000019661 -0.0000004197 -0.0000007076 -0.0000000284 0.0000003292 -0.0000009223 -0.0000236882 -0.0000026348 0.0000049887 0.0000047352 -0.0000030936 0.0000011222 0.0000026216 -0.0000004624 0.0000010126 0.0000008753 -0.0000005536 -0.0000076064 -0.0000096839 0.0000083996 -0.0000135779 0.0000030361 0.0000083506 0.0000017462 -0.0000007160 0.0000006982 -0.0000004371 -0.0000001728 0.0000006669 -0.0000010581 -0.0000030145 -0.0000000969 0.0000014203 0.0000000665 0.0000009980 0.0000076692 0.0000428982 -0.0000046232 -0.0000026208 0.0000060633 -0.0000002580 -0.0000005610 0.0000010852 0.0000000377 0.0000022754 0.0000002229 0.0000015220 -0.0000085425 -0.0000171492 0.0000023216 -0.0000208296 -0.0000072384 -0.0000070360 -0.0006129939 0.0001711897 -0.0009991002 0.0061548633 0.0045359738 -0.0022982798 0.0056726506 -0.0110945021 0.0107598125 -0.0045905674 0.0043285804 0.0031823975 0.0039979412 0.0073950755 -0.0054517808 0.0228518151 -0.0936103653 0.0991957170 -0.0304933660 -0.0301662614 -0.0562699993 -0.0395391625 0.0419370479 0.0201996566 0.0000032649 -0.0000086980 -0.0000028454 -0.0000091862 -0.0000269553 -0.0000152680 -0.0000014265 0.0000064876 0.0000032064 0.0000059979 -0.0000059964 -0.0000041426 -0.0000344601 0.0000282865 0.0000167608 -0.0000354847 -0.0000177092 -0.0000213905 0.0000065572 -0.0000019294 0.0000047878 -0.0000009880 0.0000211464 0.0000034416 0.0000065299 -0.0000042553 -0.0000000321 0.0000162785 -0.0001278706 0.0000094771 0.0000650868 0.0000397797 -0.0000189312 0.0000544434 -0.0000235466 0.0000048247 -0.0000707354 -0.0000377976 0.0000113667 0.0000520158 0.0000053492 -0.0000189538 -0.0000228039 0.0001332086 0.0000389637 0.0044720356 0.0027778138 0.0005819575 -0.0000144831 0.0001533180 0.0002257187 -0.0000307938 -0.0000338914 -0.0000152432 -0.0000234464 0.0000872285 0.0000404465 0.0000230276 -0.0000087972 -0.0000262993 -0.0000010651 -0.0000270071 -0.0000436509 0.0000155486 0.0000286000 0.0000346059 0.0000642010 0.0003293308 0.0000772809 -0.0000516475 -0.0000507089 0.0001148334 0.0000209778 0.0000138494 -0.0000204509 0.0000256807 0.0000143388 -0.0001011973 -0.0000776819 -0.0000695073 -0.0003478762 -0.0004584352 0.0007133516 -0.0002603616 0.0001219568 -0.0004400099 0.0006209581 -0.0000303185 -0.0000868031 0.0000732275 0.0000011798 0.0000016529 0.0000153886 0.0000360261 0.0000184445 -0.0000012063 0.0003350901 0.0001985169 -0.0003945466 -0.0000250918 -0.0000058199 0.0000277640 -0.0000095108 0.0000026791 0.0000107578 -0.0001916576 -0.0001997317 -0.0001123219 -0.0040984786 -0.0012469235 0.0027469212 0.0002811611 0.0002187337 0.0000749587 0.0001033757 0.0000436059 -0.0000823204 0.0000104841 -0.0000600506 -0.0001633512 -0.0002545330 -0.0003806558 -0.0008283455 0.0001646184 0.0055966946 0.0118278874 0.0000178724 -0.0000076529 0.0000264129 0.0004807565 0.0002333955 0.0004858355 0.0005252546 -0.0006468862 -0.0013725757 0.0003299869 0.0004660443 0.0003291760 0.0000259841 -0.0000688729 -0.0000077893 0.0061328737 -0.0058821290 0.0058276176 -0.0015895962 -0.0005864797 -0.0011965047 0.0001745154 0.0000776929 -0.0002419591 -0.0003854874 -0.0000845044 0.0002343955 -0.0004937847 0.0006981272 0.0007038682 0.0311017623 -0.0139094885 -0.0265984806 0.0081202101 0.1081419668 0.0061713419 -0.1096857083 -0.0296580099 -0.0494709266 0.0112626827 -0.0107303581 -0.0097463123 -0.0009543321 -0.0069146583 0.0210617109 0.0066798701 0.0234818538 0.0002340967 0.0003272376 0.0014559550 0.0003650818 -0.0024097134 -0.0000452306 -0.0008331376 -0.0000078246 -0.0019657739 0.0030156870 0.0047533998 -0.0174473412 0.0027454594 -0.0074144616 0.0016040425 -0.0122364092 0.0089279606 0.0068267812 0.0002491163 -0.0000088154 -0.0000010187 0.0000005184 0.0000060020 0.0000010417 0.0000015197 -0.0000002920 -0.0000002317 0.0000023679 0.0000042281 -0.0000003437 -0.0000016891 0.0000035995 -0.0000032286 -0.0000048416 0.0000006212 -0.0000029489 -0.0000032380 -0.0000223937 0.0000207604 -0.0000125846 0.0000006292 0.0000243400 -0.0000245634 -0.0000028613 0.0000009849 -0.0000080083 -0.0000319766 0.0000266294 0.0000385232 0.0000047518 0.0000195339 0.0000037174 -0.0000125809 -0.0000037595 -0.0000237000 0.0000013299 -0.0000011387 0.0000005301 -0.0000081786 0.0000281637 0.0000097717 -0.0000213000 -0.0000285739 -0.0000692914 -0.0000148970 -0.0000067116 -0.0000252201 0.0000701299 -0.0000097177 0.0001404546 -0.0000716173 -0.0000098941 0.0000243305 0.0000005826 0.0000308188 0.0001185527 0.0005856639 0.0003594767 0.0007267784 0.0000721084 0.0000387989 0.0001011551 0.0000004929 -0.0000024995 0.0000035599 0.0000039099 -0.0000012490 0.0000043928 -0.0000438124 -0.0000304959 -0.0000539041 0.0000065619 -0.0000340096 -0.0000336961 0.0000013549 -0.0000004808 -0.0000023006 0.0000009245 0.0000049949 -0.0000003681 0.0000000785 0.0000069047 0.0000001060 0.0000034833 -0.0000015696 -0.0000029412 -0.0000101427 -0.0000335827 -0.0000126769 -0.0000123109 0.0000304733 -0.0000032460 0.0000008001 0.0000083151 -0.0000003122 0.0000109921 0.0000029570 -0.0000070045 -0.0000184003 -0.0001038823 -0.0000092680 -0.0000976293 -0.0000304576 0.0000467781 -0.0000059304 0.0000011512 -0.0000023916 0.0000012073 0.0000013342 -0.0000008373 0.0000038280 0.0000084987 0.0000011374 -0.0000045192 0.0000012847 -0.0000032179 -0.0000228053 -0.0000949170 -0.0000114766 0.0000225551 -0.0000146852 0.0000074266 0.0000011520 0.0000079384 -0.0000001344 -0.0000007726 0.0000012304 -0.0000007328 -0.0000028093 -0.0000628721 0.0000036781 0.0000069579 0.0000115149 0.0000018009 0.0020890260 -0.0004755431 0.0030271628 -0.0201629019 -0.0145918906 0.0067428382 -0.0176732276 0.0326246053 -0.0332477443 0.0126987332 -0.0122713880 -0.0090145803 -0.0263946807 -0.0403414460 0.0292294629 -0.1281242663 0.5414934308 -0.5582759800 0.1889798522 0.1913387915 0.3508413718 0.2470967319 -0.2602487532 -0.1275903892 0.0000005614 -0.0000057585 -0.0000013561 -0.0000120837 -0.0000011829 -0.0000049300 -0.0000003818 0.0000033543 0.0000030883 0.0000043018 -0.0000019637 -0.0000021162 -0.0000208096 0.0000165457 0.0000085446 -0.0000297398 -0.0000131595 -0.0000170121 0.0000064995 -0.0000023469 0.0000037129 -0.0000008502 0.0000090577 0.0000001383 0.0000044491 0.0000024057 0.0000026358 0.0000017640 -0.0000730222 -0.0000011424 0.0000438920 0.0000255605 0.0000024234 0.0000295895 -0.0000102292 0.0000078629 -0.0000482688 -0.0000370228 -0.0000269151 0.0000138282 0.0000261650 0.0000109727 0.0000652551 0.0000551549 0.0000343385 0.0058760945 0.0027420196 0.0022730038 -0.0000049096 0.0000934787 0.0001287802 -0.0000158257 -0.0000280228 -0.0000138866 -0.0000014915 0.0000431606 0.0000624573 0.0000245075 0.0000168310 -0.0000040936 -0.0000123217 -0.0000288951 -0.0000226777 0.0000302258 0.0000155020 -0.0000106343 -0.0000254770 -0.0000246065 -0.0000076121 -0.0001597699 -0.0000602791 0.0001596654 0.0002160177 0.0002749999 -0.0000090917 -0.0001592852 0.0000277144 0.0001663431 -0.0002642667 -0.0003222557 -0.0002739802 -0.0001722562 0.0004008105 -0.0000349335 -0.0011956255 -0.0007563958 -0.0000555227 -0.0000012085 -0.0000160305 -0.0000674659 -0.0000161146 -0.0000286181 0.0000621090 -0.0001267065 0.0001100810 0.0000247140 0.0000065310 -0.0000149653 0.0000391464 0.0000330376 0.0000222655 -0.0000112139 -0.0000220589 0.0000458878 -0.0000030107 0.0003159790 -0.0002493263 -0.0001637705 0.0001228569 -0.0000325821 -0.0002388295 -0.0003820573 -0.0003349510 -0.0001612228 0.0002742275 0.0001683228 -0.0000359947 0.0000057379 -0.0001231083 -0.0004077113 0.0000057967 -0.0000020977 -0.0000393290 -0.0001128241 0.0001871706 0.0006187277 0.0000010833 -0.0000037456 0.0000002274 0.0005727101 -0.0002173036 -0.0000686079 -0.0027030977 -0.0015088449 0.0000831138 0.0000087781 0.0005650856 0.0005861785 0.0000823364 -0.0000407711 -0.0000360580 0.0000692610 -0.0000010502 0.0000296472 -0.0001675221 -0.0000519928 -0.0001456885 -0.0001840546 -0.0007031553 -0.0003981868 0.0018438187 0.0002746001 -0.0012739856 0.0210173243 -0.0264856197 -0.0326253784 -0.0003322547 -0.0000284710 0.0003426999 0.0000433965 0.0003217744 -0.0000655787 -0.0007685522 -0.0001786919 -0.0005568953 0.0008248813 -0.0008885332 -0.0007455356 -0.0000400058 -0.0009090863 0.0024952752 0.0008449493 0.0026706201 0.0000096761 0.0022875035 0.0091209317 0.0022458440 -0.0017685825 -0.0009500747 -0.0012984381 0.0004559847 -0.0015875579 0.0034273234 -0.1841546735 0.6470295120 -0.0957298834 0.2881819182 -0.0610693272 0.5007303237 -0.3565717387 -0.2655166216 -0.0028336054 -0.0000095220 -0.0000008846 0.0000012393 0.0000029641 -0.0000000610 0.0000066568 0.0000005178 0.0000026202 0.0000038553 0.0000044260 -0.0000003588 -0.0000008163 0.0000005863 -0.0000024485 -0.0000009441 0.0000014911 -0.0000027269 -0.0000018791 -0.0000113940 0.0000060758 -0.0000502921 -0.0000227814 0.0000269464 -0.0000526349 0.0000021560 0.0000044570 -0.0000253778 -0.0000266291 0.0000419196 -0.0000023036 -0.0000142594 0.0000125898 -0.0000034480 -0.0000048109 0.0000034365 -0.0000015131 0.0000045169 -0.0000031904 0.0000015423 -0.0000058611 0.0000034871 -0.0000022093 0.0000030532 -0.0000005439 -0.0000003543 -0.0000032182 0.0000052024 0.0000025411 0.0000147267 -0.0000083808 0.0000222631 -0.0000091897 0.0000149903 0.0000277172 0.0000224152 -0.0000154498 -0.0000074758 -0.0000049084 -0.0000267640 -0.0000118862 0.0000099435 -0.0000602881 -0.0000347561 -0.0000057642 -0.0000035723 0.0000131127 0.0000027021 -0.0000038626 0.0000122012 -0.0000061234 0.0000035115 0.0000005699 -0.0000122672 0.0000071709 0.0000080493 0.0000001186 -0.0000005678 -0.0000009888 -0.0000003974 0.0000024053 0.0000009503 -0.0000013608 -0.0000020233 0.0000010182 0.0000051783 -0.0000034617 -0.0000029212 0.0000032082 0.0000469545 -0.0000025964 -0.0000369365 0.0000389514 0.0000217299 0.0000010195 0.0000026017 0.0000000545 0.0000059977 0.0000014078 -0.0000030183 -0.0000129087 -0.0000448982 -0.0000005568 -0.0000514581 -0.0000203309 0.0000263648 -0.0000040078 -0.0000002830 -0.0000023098 0.0000010590 0.0000012382 0.0000005582 0.0000019963 0.0000011736 0.0000012339 0.0000019996 -0.0000025973 0.0000013885 -0.0000125824 -0.0000106749 -0.0000089218 -0.0000261040 0.0000215377 -0.0000179155 0.0000000908 0.0000064807 -0.0000003163 0.0000049491 0.0000024150 0.0000027158 -0.0000070574 -0.0000755854 -0.0000018737 -0.0000408798 -0.0000207589 -0.0000221822 0.0004085103 0.0002801177 0.0001929563 -0.0055145793 -0.0036685702 0.0025491963 -0.0014921784 0.0027954420 -0.0029226196 0.0020375376 -0.0013647492 -0.0013089321 -0.0006589739 -0.0010681971 0.0007729215 -0.0030237315 0.0143023857 -0.0148142711 0.0045113211 0.0044406584 0.0082810294 0.0062044159 -0.0063271866 -0.0030429360 -0.0000003501 0.0000019318 0.0000003123 0.0000099040 0.0000284480 0.0000000534 -0.0000000109 -0.0000038998 -0.0000016726 -0.0000009893 0.0000014331 0.0000004731 0.0000081232 -0.0000075067 -0.0000033164 0.0000088385 0.0000047090 0.0000051456 -0.0000018215 0.0000010054 -0.0000017382 -0.0000003657 -0.0000087651 -0.0000012328 -0.0000015811 0.0000003917 -0.0000005587 0.0000009676 0.0000739876 -0.0000009411 -0.0000132290 -0.0000109300 -0.0000004255 -0.0000146715 -0.0000004312 -0.0000072546 0.0000193499 0.0000346830 0.0000174115 0.0000054178 -0.0000263165 -0.0000112748 -0.0000160503 -0.0000368720 -0.0000422289 0.0044397170 0.0025699111 0.0019669712 -0.0000394443 0.0003003269 0.0005027417 0.0000633777 -0.0000202297 -0.0000021510 -0.0001891601 0.0002920017 0.0001610763 -0.0000576217 -0.0001128540 -0.0000013357 0.0000234582 -0.0000246994 -0.0000934582 -0.0004481428 0.0000812360 0.0002595904 -0.0000176418 0.0002711417 -0.0001299004 0.0003202437 0.0001983932 -0.0003674114 -0.0004396429 -0.0006489107 0.0000139750 0.0031092379 0.0005557639 -0.0032596729 -0.0001821065 -0.0003686523 -0.0002642440 0.0001682364 0.0004074947 0.0001552843 -0.0023594550 -0.0041194652 0.0016415728 -0.0001122642 -0.0000921713 -0.0000046160 0.0000019032 -0.0000021768 -0.0000136848 -0.0000379136 -0.0000395271 -0.0000151179 0.0000013509 -0.0000033796 -0.0000093217 -0.0000052663 -0.0000083516 0.0000043959 -0.0000078298 0.0000023206 0.0000017290 0.0006621471 0.0005495182 0.0003936274 0.0001267763 0.0001222080 -0.0001871278 -0.0000659575 -0.0000511169 -0.0000630231 0.0000193266 0.0000164834 -0.0000104548 0.0000022482 0.0000535956 0.0002295924 0.0002105948 0.0001873956 0.0007474458 -0.0032463598 -0.0038929683 -0.0110795490 -0.0000026292 0.0000021484 -0.0000021192 -0.0003354589 -0.0001474536 -0.0011494605 0.0001806065 -0.0000688842 0.0000868186 -0.0000584572 0.0000187744 -0.0000809737 0.0000020011 0.0000188895 -0.0000116782 0.0002772136 0.0004905318 0.0001708280 -0.0001106857 0.0001757969 0.0002097053 -0.0000360989 -0.0001885785 0.0000823388 0.0000682743 -0.0001595726 -0.0002481784 -0.0000013589 0.0001014510 0.0002416134 0.0001117007 -0.0001187760 -0.0001750015 -0.0002231840 -0.0049231331 -0.0001683521 -0.0032141220 -0.0009824572 -0.0015887249 0.0016920016 -0.0012988107 -0.0011906481 0.0000401934 0.0004788488 -0.0012754583 -0.0004490040 -0.0013569051 0.0000153424 0.0003612404 0.0015120282 0.0003527851 0.0000609088 -0.0000082162 0.0000116435 0.0000213542 0.0007421599 -0.0012371721 0.0005126593 -0.0016980896 0.0002124369 -0.0015217722 0.0002678056 -0.0032805676 0.0001691433 0.0001715972 0.0000327939 0.0000026713 0.0000013924 0.0000002831 0.0000009496 -0.0000053808 -0.0000100553 0.0000015484 0.0000025467 -0.0000015946 -0.0000033601 -0.0000024902 0.0000010320 -0.0000008182 -0.0000005491 -0.0000014461 -0.0000011603 -0.0000004184 -0.0000010009 -0.0000221488 0.0000268166 0.0001136368 0.0000019940 -0.0000178282 0.0000252640 0.0000138997 0.0000082271 0.0000259731 -0.0000032205 0.0000086719 0.0000130111 0.0000068698 0.0000044164 0.0000042911 0.0000043470 -0.0000011176 0.0000047951 -0.0000013396 0.0000003202 -0.0000017486 0.0000043626 -0.0000034373 0.0000009000 -0.0000041887 0.0000023299 -0.0000032920 0.0000049369 -0.0000038834 -0.0000010386 -0.0000245362 -0.0000013761 -0.0000493793 -0.0000006507 0.0000013229 -0.0000015159 -0.0000115901 0.0000016243 -0.0000146684 0.0000016471 -0.0000072431 0.0000360277 -0.0000290688 0.0000435445 0.0000299243 0.0000010180 -0.0000021185 -0.0000131582 -0.0000127478 -0.0000023389 -0.0000127300 0.0000077873 0.0000016647 0.0000088343 0.0000030407 0.0000016185 0.0000035193 -0.0000003141 -0.0000000562 0.0000002354 -0.0000002314 -0.0000009788 -0.0000002830 0.0000001787 -0.0000009695 -0.0000005737 -0.0000008615 -0.0000000559 0.0000000687 0.0000012420 0.0000001391 -0.0000034784 -0.0000022145 -0.0000011933 -0.0000041982 0.0000000095 -0.0000004289 -0.0000002319 -0.0000032428 -0.0000007630 0.0000014859 0.0000013555 0.0000139795 0.0000027523 0.0000267098 0.0000109682 -0.0000216866 0.0000014857 -0.0000003920 0.0000003224 -0.0000003069 -0.0000003857 -0.0000002025 -0.0000017648 -0.0000128851 0.0000000937 -0.0000004092 0.0000020257 -0.0000008392 0.0000138037 0.0001407133 -0.0000211978 0.0000185018 -0.0000164188 0.0000061603 -0.0000003705 -0.0000054804 -0.0000002092 -0.0000013830 -0.0000008304 -0.0000011725 0.0000052977 0.0000559989 -0.0000046100 0.0000157217 0.0000049842 0.0000018377 -0.0129508295 0.0866237967 -0.0173248537 -0.4324539602 -0.2987643019 0.1629807443 0.1859447811 -0.3678870365 0.3616214915 0.4092014527 -0.3597382132 -0.3020197149 -0.0001492768 -0.0008994669 -0.0006795132 -0.0015832251 -0.0002631432 -0.0006384526 0.0047060996 0.0034785338 0.0072148529 -0.0034297581 0.0047380545 0.0022225290 -0.0000011197 0.0000009585 0.0000004825 0.0000031506 0.0000276514 0.0000050264 -0.0000002013 -0.0000028115 -0.0000001616 -0.0000003898 0.0000010994 0.0000006562 0.0000042037 -0.0000036921 -0.0000029959 0.0000092383 0.0000054303 0.0000049891 -0.0000016965 -0.0000006187 -0.0000014543 -0.0000003511 -0.0000095024 -0.0000020330 -0.0000004655 0.0000014096 -0.0000005697 -0.0000000785 0.0000716269 -0.0000028181 -0.0000109450 -0.0000046308 0.0000037630 -0.0000081824 0.0000074271 0.0000015648 0.0000121095 -0.0000116144 -0.0000106994 -0.0000047202 0.0000103290 0.0000076680 -0.0000011424 0.0000041388 0.0000034931 -0.0003043742 -0.0001545482 -0.0000959120 -0.0000008826 -0.0000186270 -0.0000187312 -0.0000003337 0.0000014888 0.0000018625 0.0000019022 -0.0000027717 -0.0000029657 -0.0000013878 0.0000013191 0.0000027019 -0.0000007556 -0.0000002963 0.0000010006 0.0000004189 -0.0000015462 0.0000001746 -0.0000023850 -0.0000079929 0.0000003886 0.0000191766 0.0000005886 -0.0000207739 0.0000084103 0.0000135870 0.0000061010 -0.0000021244 0.0000027373 0.0000026603 0.0000124446 0.0000158123 0.0000129491 -0.0000034333 -0.0000343225 0.0000014849 0.0002339048 0.0002169244 0.0000421957 0.0000004611 0.0000080413 -0.0000019226 -0.0000001512 0.0000022905 0.0000053302 0.0000118016 0.0000093291 0.0000069696 -0.0000459290 -0.0000230941 0.0000462629 -0.0000247516 -0.0000179476 -0.0000183656 0.0000126129 0.0000029531 -0.0000104824 -0.0001384343 -0.0000837550 -0.0000569231 0.0004919024 0.0002220246 -0.0004490017 0.0002678416 0.0002841507 0.0001328058 -0.0001233933 -0.0000425441 0.0000895825 -0.0000039131 -0.0000231184 -0.0001245698 -0.0000024210 -0.0000009503 -0.0000093480 0.0000870814 0.0000320442 0.0001400630 -0.0000013952 0.0000031062 -0.0000008289 0.0000199045 -0.0000107481 -0.0000187454 -0.0000249301 0.0000248070 0.0001536135 -0.0000976303 -0.0001041905 0.0000443360 0.0001562534 0.0000769802 -0.0000687172 0.0447662481 0.0584081878 0.0190823920 0.0020340541 -0.0006026699 -0.0043079400 -0.0285389051 -0.0446512157 -0.0005899463 0.0000223321 -0.0000114304 -0.0000330522 -0.0002358283 -0.0001356388 0.0001594804 -0.0215288146 0.0197628620 0.0264319439 -0.0274465443 -0.5981256737 -0.0280445256 -0.4893890212 -0.1243640510 -0.2251954891 -0.0245338869 0.0186468868 0.0160091480 -0.0007858563 -0.0120194890 0.0352004497 0.0006980206 0.0012193169 -0.0007225498 0.1017465887 0.4325926575 0.0979956722 0.2368756275 -0.0030520266 0.1028531944 0.0016837531 0.1068271296 -0.1922846581 0.0005080634 -0.0010670599 0.0004063282 -0.0010349896 0.0004991574 -0.0019156295 0.0030673395 0.0021297279 -0.0000391515 0.0000000769 -0.0000000449 0.0000002017 -0.0000010729 0.0000008133 0.0000021223 -0.0000004975 -0.0000004515 -0.0000001220 0.0000003545 0.0000004987 -0.0000000635 -0.0000013429 0.0000003690 0.0000017325 0.0000015013 0.0000011768 0.0000012694 0.0000104721 -0.0000096332 -0.0000208354 0.0000007219 0.0000072881 0.0000088027 -0.0000023467 0.0000002907 0.0000030939 0.0000044900 -0.0000017458 -0.0000157620 -0.0000156740 -0.0000152488 -0.0000143582 0.0000145639 -0.0000038027 0.0000114192 -0.0000029930 0.0000002093 -0.0000214721 -0.0000280909 -0.0000374203 0.0000277090 0.0000006743 0.0000112971 0.0000191469 0.0000130883 -0.0000122622 -0.0000081483 -0.0000704930 -0.0000229415 -0.0001578052 -0.0000297695 -0.0000001565 0.0000255983 0.0000118805 -0.0000288600 -0.0001710342 -0.0000784202 -0.0000095241 -0.0001139110 -0.0000664740 0.0001333948 0.0001455931 0.0000011157 -0.0000002370 -0.0000016314 0.0000003614 0.0000000621 -0.0000005580 0.0001119177 0.0000910823 0.0000669234 0.0000267448 0.0001057338 0.0000159061 -0.0000004261 0.0000001163 0.0000003386 -0.0000004309 -0.0000008898 0.0000003565 -0.0000016541 -0.0000069754 0.0000002862 0.0000013007 -0.0000011006 -0.0000007129 0.0000145264 0.0000697846 0.0000024308 -0.0000151116 0.0000071944 0.0000120896 -0.0000000833 -0.0000019314 -0.0000000019 -0.0000034939 -0.0000012788 0.0000020695 0.0000038292 0.0000215258 0.0000067547 0.0000350717 0.0000088073 -0.0000188888 0.0000011231 0.0000000363 0.0000001848 -0.0000001988 -0.0000002115 0.0000006577 -0.0000017222 -0.0000127387 0.0000002577 0.0000022745 -0.0000005472 0.0000012830 0.0000130254 0.0001382557 -0.0000135096 -0.0000108850 0.0000060730 -0.0000068082 -0.0000005069 -0.0000032046 -0.0000002364 0.0000019950 0.0000005238 0.0000008508 0.0000023250 0.0000251149 -0.0000031618 -0.0000179913 -0.0000138377 -0.0000118408 0.0001035732 -0.0005235501 0.0001116344 0.0023888218 0.0016933808 -0.0009067198 -0.0012392541 0.0022586910 -0.0024316301 -0.0024740599 0.0022036253 0.0018091480 0.0003840659 -0.0002914878 0.0001128178 0.0001205766 0.0007530310 -0.0012341647 -0.0012008096 -0.0010100209 -0.0020760023 -0.0031649630 0.0031446656 0.0015891222 -0.0000142278 0.0000093760 0.0000034962 -0.0000538357 -0.0001684956 0.0000052716 0.0000080983 0.0000195134 0.0000006323 -0.0000115321 0.0000053720 0.0000063249 0.0000420525 -0.0000330433 -0.0000436711 0.0000837211 0.0000460516 0.0000332239 -0.0000142383 -0.0000015741 -0.0000099635 -0.0000000669 -0.0000340593 0.0000000068 0.0000007037 -0.0000080456 -0.0000078268 0.0000113956 0.0003611366 0.0000151680 -0.0000915686 0.0000151286 0.0000593596 -0.0000891152 0.0001469091 0.0000550216 0.0000989472 -0.0003981604 -0.0002745751 -0.0000729593 0.0003360192 0.0001514845 0.0000851358 0.0002810807 0.0002433155 -0.0036778180 -0.0017371424 -0.0020617197 0.0000343138 -0.0006507437 -0.0010301388 -0.0000452939 0.0000224503 0.0001030865 0.0000513597 0.0000956514 0.0000099330 0.0000946252 0.0001458507 0.0000500008 0.0000115038 -0.0000048256 -0.0000216046 0.0000346546 -0.0000044405 -0.0000625344 -0.0001963093 -0.0002214790 0.0000200123 -0.0001788165 -0.0001581030 0.0000824493 0.0002445821 0.0003170821 -0.0000048701 -0.0003789017 -0.0000829626 0.0005722305 0.0004033419 0.0001208391 0.0000702735 -0.0001162530 0.0000704922 0.0000286259 -0.0002579389 -0.0001113486 0.0000195956 0.0000765787 0.0000303515 -0.0000115458 0.0000282239 -0.0000018722 -0.0000205127 -0.0000065830 0.0000017178 0.0000191708 -0.0006172660 -0.0002993482 0.0005315554 -0.0000027263 -0.0000468657 -0.0000402309 -0.0000189903 -0.0000134894 -0.0000060985 -0.0000107275 0.0000002683 -0.0000223517 0.0060185594 0.0025651690 -0.0057424304 -0.0000627356 0.0002403430 -0.0000393415 0.0000939409 0.0000625206 -0.0001094628 -0.0000139226 0.0000380747 0.0000287044 -0.0006880143 -0.0008452950 -0.0024694628 0.0107228338 0.0135628229 0.0372620535 0.0000142404 -0.0000080720 -0.0000083021 0.0000793650 -0.0000311585 -0.0000777490 0.0000264150 0.0001294123 0.0001469742 0.0000588717 -0.0000956591 -0.0000179806 0.0000331274 -0.0001040497 0.0000120360 0.0072093950 0.0110620089 0.0038662203 0.0209763918 -0.0841303084 -0.0165518847 0.0078826570 0.0218088910 -0.0061407891 -0.0000058719 -0.0000041679 -0.0000077532 0.0000596890 -0.0000136842 0.0000088356 0.0032380554 0.0002962482 -0.0011171184 -0.0055162370 -0.1114034048 -0.0050057531 -0.0858050159 -0.0214301905 -0.0397099858 -0.4508647581 0.3267584316 0.3007607946 0.0050424519 0.0240322007 -0.1044955452 0.2026851036 0.6613654051 0.0014974857 -0.0441079936 -0.1863395918 -0.0434920409 -0.0523040203 0.0028155362 -0.0222694927 -0.0026602071 -0.0787385181 0.1379683677 -0.0002033436 0.0006132882 -0.0001173591 0.0000088759 -0.0000752493 -0.0000137455 -0.0004535656 -0.0003256156 0.0000010971 -0.0000024356 -0.0000025501 0.0000030397 0.0000033411 -0.0000020213 -0.0000101051 0.0000004339 0.0000002557 0.0000006498 0.0000055273 0.0000025590 0.0000008882 -0.0000029571 -0.0000050336 -0.0000045246 0.0000109464 0.0000067929 0.0000027415 -0.0000261850 0.0000232675 0.0001074632 0.0000124116 0.0000060710 0.0000342205 -0.0000123290 0.0000013089 0.0000179506 -0.0000370164 0.0000279379 0.0000409486 -0.0000935757 -0.0001218172 -0.0000677173 0.0000336417 0.0000013461 0.0000493560 -0.0000239099 -0.0000080997 -0.0000318969 0.0000956047 -0.0000860301 0.0000460809 -0.0000391120 0.0000308353 0.0000007129 0.0000275203 -0.0000310039 -0.0000003514 -0.0003653908 -0.0000273003 -0.0007643643 -0.0015842983 -0.0002927819 0.0007526580 -0.0002250954 0.0000866059 0.0000824692 -0.0000000435 0.0000055384 0.0000676295 -0.0000329206 0.0001467780 0.0000957260 0.0000072079 -0.0000021507 -0.0000120749 0.0000024091 -0.0000013172 -0.0000057828 0.0000710313 0.0000107872 -0.0000068710 0.0000660422 -0.0001303382 -0.0000492616 -0.0000011466 0.0000017093 -0.0000000236 0.0000025724 -0.0000054216 -0.0000012653 0.0000035852 0.0000120219 -0.0000011769 -0.0000051035 0.0000047126 0.0000030480 -0.0000303694 -0.0001443739 0.0000029444 0.0000379615 -0.0000345564 -0.0000241141 -0.0000012210 0.0000028261 0.0000008299 -0.0000075630 -0.0000033816 0.0000037800 0.0000081474 -0.0000070033 -0.0000005875 0.0000841106 0.0000374231 -0.0000463906 0.0000066934 0.0000036528 0.0000037843 -0.0000032221 -0.0000022489 -0.0000012393 -0.0000023899 -0.0000026172 -0.0000011734 -0.0000067876 0.0000067950 -0.0000043640 0.0000104982 0.0000112787 0.0000030516 0.0000759232 -0.0000676289 0.0000526364 -0.0000003218 -0.0000201066 0.0000009837 -0.0000073704 -0.0000030268 -0.0000041225 0.0000192236 0.0002395998 0.0000053009 0.0000475930 0.0000257492 0.0000283078 0.0000108932 0.0002094387 0.0000083308 -0.0012068614 -0.0009040604 0.0004709131 0.0003881268 -0.0004991332 0.0005725154 0.0010290508 -0.0008866847 -0.0008546075 -0.0056225699 0.0037082278 -0.0061528905 0.0095474960 -0.0422659298 0.0438030835 0.0246014286 0.0293240787 0.0490769117 0.0315983378 -0.0329999238 -0.0190102022 0.0000055304 -0.0000023059 -0.0000009332 0.0000359251 0.0001315657 0.0000015995 -0.0000044370 -0.0000152921 -0.0000013041 0.0000048816 -0.0000003940 -0.0000021773 -0.0000112699 0.0000084409 0.0000158407 -0.0000229994 -0.0000124547 -0.0000058429 0.0000041910 0.0000013103 0.0000018216 -0.0000008922 -0.0000030450 -0.0000034084 -0.0000017664 0.0000051282 0.0000022871 -0.0000052736 -0.0000103558 -0.0000029838 0.0000222883 -0.0000205901 -0.0000247090 0.0000251665 -0.0000616044 -0.0000269244 -0.0000204724 0.0001908758 0.0001254878 0.0000373247 -0.0001627725 -0.0000752765 -0.0000526064 -0.0001492383 -0.0001266838 0.0009386803 0.0004497570 0.0007483104 -0.0000179686 0.0003240884 0.0005216521 0.0000265307 -0.0000073004 -0.0000523914 -0.0000282647 -0.0000573479 -0.0000125277 -0.0000567798 -0.0000809500 -0.0000237841 -0.0000056012 0.0000056022 0.0000145564 -0.0000218235 0.0000003398 0.0000332271 0.0001075766 0.0001135800 -0.0000114238 0.0001411754 0.0000991226 -0.0000938763 -0.0001485049 -0.0001926410 0.0000058862 0.0002193358 0.0000409922 -0.0003127500 -0.0001694751 -0.0000149841 0.0000071716 0.0000526854 -0.0001191010 -0.0000177412 0.0007344973 0.0004828193 0.0001178458 -0.0000193165 0.0000066130 0.0000003432 -0.0000019311 -0.0000026855 -0.0000083692 -0.0000284707 -0.0000172252 -0.0000147919 0.0002283239 0.0001063383 -0.0002062007 0.0000453116 0.0000367117 0.0000504337 -0.0000104034 -0.0000021694 0.0000100394 0.0002174762 0.0001516075 0.0001108960 -0.0022167052 -0.0009044266 0.0022015716 -0.0004600833 -0.0005451820 -0.0002668254 0.0000942217 0.0000231531 -0.0000538459 0.0000036408 0.0000439470 0.0001703374 0.0003785188 0.0004660696 0.0013615103 -0.0058022447 -0.0075074209 -0.0205615174 -0.0000086441 0.0000078515 0.0000011070 -0.0000734774 0.0000491235 0.0000477791 0.0001298925 -0.0000977157 -0.0000417896 -0.0001293757 -0.0003640538 -0.0000056990 0.0002982432 0.0008245719 0.0000595725 0.0300829170 0.0388992137 0.0125352929 -0.0101915595 0.0222608161 0.0151695599 0.0343821820 0.0627488935 -0.0048142308 -0.0000824854 -0.0000032770 0.0000386368 0.0003169814 0.0002738445 -0.0002419294 -0.0181643944 0.0143396213 0.0205689991 -0.0183294115 -0.4005503624 -0.0183508287 -0.3264680528 -0.0830261558 -0.1509705338 0.1706659770 -0.1255331427 -0.1125563169 0.0005693444 0.0261346898 -0.0701723157 -0.0525160645 -0.1688837991 0.0007744811 -0.1388068139 -0.5883768828 -0.1347709739 -0.2667904009 0.0051030973 -0.1162044327 -0.0050947553 -0.1727251774 0.3078150715 -0.0004744778 0.0003526530 -0.0002205103 0.0015064154 -0.0006250550 0.0027460692 -0.0045041340 -0.0030655914 0.0000211371 0.0000029491 0.0000010687 -0.0000016493 -0.0000038340 0.0000012401 0.0000062876 -0.0000029653 -0.0000037309 -0.0000047129 -0.0000043834 -0.0000008758 0.0000007888 0.0000009655 0.0000026416 0.0000030899 -0.0000052304 -0.0000024007 -0.0000004919 0.0000253276 -0.0000229768 -0.0000731084 0.0000194031 0.0000344438 0.0000234869 0.0000098921 -0.0000000641 -0.0000049943 0.0000243003 -0.0000136276 -0.0000232776 0.0000420746 0.0000573092 0.0000345371 0.0000057979 -0.0000089658 -0.0000088773 -0.0000015825 0.0000062659 0.0000038971 -0.0000478721 -0.0000142875 0.0000071457 0.0000144711 -0.0000029949 0.0000148278 0.0000045774 -0.0000020106 -0.0000074896 0.0000406874 -0.0000094222 0.0001052427 0.0004081655 0.0000201850 -0.0002403308 0.0000416323 -0.0000091379 -0.0001003301 -0.0000550205 0.0000082783 -0.0000914818 -0.0000587288 0.0000937652 0.0001141634 -0.0000043729 0.0000013277 0.0000045031 -0.0000040644 0.0000001737 0.0000008340 0.0000614819 0.0000570984 0.0000302205 0.0000289235 0.0000992175 -0.0000018413 0.0000000089 -0.0000010875 0.0000004946 -0.0000019886 0.0000014633 0.0000009643 -0.0000032569 -0.0000136666 0.0000005430 0.0000031739 -0.0000034947 -0.0000020284 0.0000306194 0.0001423501 -0.0000001531 -0.0000333856 0.0000230994 0.0000226732 -0.0000005549 -0.0000096313 -0.0000005029 -0.0000014011 0.0000007977 0.0000009986 0.0000123747 0.0000967480 0.0000009096 0.0000048806 -0.0000047016 -0.0000024605 -0.0000006869 -0.0000021970 -0.0000009526 0.0000006806 0.0000004556 0.0000013007 -0.0000011565 -0.0000100947 0.0000000996 0.0000078260 -0.0000051040 0.0000047425 0.0000095694 0.0001206456 -0.0000023856 -0.0000669266 0.0000533699 -0.0000439970 -0.0000008479 0.0000011058 -0.0000008132 0.0000063448 0.0000022929 0.0000032544 -0.0000042141 -0.0000345826 -0.0000029582 -0.0000513073 -0.0000340300 -0.0000297417 -0.0000602461 -0.0002634714 0.0000584454 0.0018510597 0.0013445743 -0.0007500751 -0.0005544140 0.0008030468 -0.0009960241 -0.0008871084 0.0007760618 0.0007208979 0.0042151162 -0.0028961720 0.0039456828 -0.0061262481 0.0280941681 -0.0294452940 -0.0172307406 -0.0196165697 -0.0334208498 -0.0259991644 0.0267687038 0.0151285920 0.0000041648 -0.0000061951 -0.0000067840 0.0001434359 0.0004775228 -0.0000047478 -0.0000172742 -0.0000465780 0.0000007869 0.0000156034 -0.0000075440 -0.0000087653 -0.0000724848 0.0000795997 0.0000400737 -0.0000513354 -0.0000193409 -0.0000261303 0.0000107055 0.0000001271 0.0000057779 -0.0000006158 0.0000217092 -0.0000007684 0.0000089416 0.0000077259 0.0000033793 -0.0000228697 -0.0002289541 -0.0000116298 0.0000779004 0.0000480361 0.0000115215 0.0001279554 -0.0000409059 0.0000617930 -0.0001156932 -0.0001941210 -0.0001040441 -0.0000088165 0.0001187353 0.0000687735 -0.0001015344 0.0002963713 0.0002821144 -0.0339923956 -0.0157402432 -0.0161740250 0.0000592493 -0.0014065937 -0.0022388416 -0.0001128858 0.0000511584 0.0002355649 0.0000410874 0.0001955157 -0.0000345246 0.0001808110 0.0002964353 0.0001467259 0.0000284623 -0.0000167610 -0.0000632029 0.0000358465 -0.0000362016 -0.0000683160 -0.0003471201 -0.0001280009 0.0001156276 0.0001258550 -0.0001522039 -0.0003563895 0.0004037233 0.0005094892 -0.0000228700 -0.0002196213 -0.0000171460 0.0004638695 0.0030847890 0.0014222547 0.0009402716 -0.0006101923 -0.0002040653 -0.0000694703 0.0025769822 0.0027787497 0.0013997816 -0.0000438178 -0.0000520581 0.0000571296 -0.0000075753 -0.0000192263 -0.0000397409 0.0000354594 0.0000277045 -0.0000052441 0.0007652235 0.0004236302 -0.0007366738 -0.0002616665 -0.0001802286 -0.0001019163 0.0000440616 0.0000160049 -0.0000195700 -0.0005217921 -0.0004351221 -0.0002329542 -0.0089703607 -0.0037696380 0.0074880481 0.0032321245 0.0028432858 0.0013814885 -0.0003368147 -0.0001963334 0.0002671313 0.0000183236 0.0001001584 0.0001592420 -0.0020562460 -0.0025383539 -0.0069824136 0.0282941982 0.0399423539 0.1053415398 -0.0000034131 0.0000006645 0.0000083981 0.0000301143 0.0004126598 -0.0003047515 0.0000613699 -0.0000166491 -0.0003760416 0.0001619450 -0.0000647478 -0.0000612812 0.0002134504 0.0002481493 0.0000967030 -0.0014232970 0.0064001094 0.0032021498 0.0068829283 0.0154407226 -0.0209266265 0.0189174192 -0.0030535983 0.0214143137 -0.0000810346 -0.0000165162 0.0000111113 0.0001575894 -0.0000506085 -0.0000087361 0.0331003396 -0.0135608021 -0.0284057825 -0.0037588170 -0.0594987579 -0.0021248597 -0.0130981290 -0.0031856419 -0.0061489369 -0.0371341668 0.0290334746 0.0206718280 -0.0049645499 -0.0739859875 0.2304380466 -0.0437228776 -0.1439491913 -0.0027926898 -0.0102178815 -0.0534708451 -0.0094564220 -0.2238412296 -0.0023013058 -0.0937488456 0.0066163152 0.0912751545 -0.1537374021 -0.0004946558 0.0015290139 -0.0001574411 0.0000638808 0.0000281488 0.0001505242 -0.0011068880 -0.0007372738 0.0000067987 0.0000166532 0.0000094063 -0.0000073615 -0.0000134670 -0.0000014034 -0.0000010521 0.0000094180 -0.0000036627 -0.0000082752 -0.0000165352 -0.0000046392 0.0000040344 0.0000083015 -0.0000000462 -0.0000022812 -0.0000176560 -0.0000132263 -0.0000097678 0.0000516393 0.0000266545 0.0000551662 0.0000415899 0.0000014486 0.0000856173 0.0000380258 0.0000072338 0.0000185654 0.0000168423 -0.0000214579 0.0000226390 0.0001517180 0.0001554154 0.0000879909 0.0000041273 0.0000011782 0.0000034524 0.0000117246 -0.0000066649 -0.0000353539 0.0000005125 0.0000204450 -0.0000010549 0.0000130479 0.0000146426 0.0000071411 0.0000007037 0.0000019094 -0.0000053913 -0.0000254885 -0.0000260685 -0.0000381752 0.0001495172 0.0001841841 0.0000498840 0.0000227754 -0.0000182524 0.0000170928 -0.0001533361 -0.0000362394 -0.0000490127 0.0000082897 0.0000210574 0.0000485124 -0.0000068698 -0.0000000471 -0.0000059872 -0.0000195282 -0.0000026237 -0.0000175793 -0.0000052188 0.0000054471 -0.0000079052 0.0000128087 0.0000405238 -0.0000138318 0.0000045563 -0.0000031372 -0.0000036518 -0.0000073118 0.0000071009 0.0000032927 -0.0000065958 -0.0000173706 0.0000004621 0.0000077441 -0.0000075775 -0.0000069588 0.0000624129 0.0002212252 -0.0000139852 -0.0000488368 0.0000701021 0.0000237819 0.0000034700 0.0000071670 -0.0000027994 0.0000204619 0.0000086802 -0.0000125814 -0.0000339060 -0.0000808711 0.0000080658 -0.0002215588 -0.0000768958 0.0001171400 -0.0000036500 -0.0000042462 -0.0000027387 0.0000011690 0.0000014310 0.0000012605 0.0000013709 -0.0000025950 0.0000002883 0.0000064282 -0.0000049632 0.0000033426 0.0000000041 0.0000560621 -0.0000129122 -0.0000532076 0.0000552460 -0.0000459751 0.0000004364 0.0000211105 -0.0000010899 0.0000094382 0.0000031286 0.0000046713 -0.0000295731 -0.0002478756 -0.0000027443 -0.0000680566 -0.0000314461 -0.0000412565 0.0010514694 0.0000358045 -0.0000475536 -0.0061101084 -0.0053008334 0.0025429810 0.0003133657 0.0023441237 -0.0008835994 -0.0033840139 0.0027079080 0.0014621557 -0.0532395942 0.0396943797 -0.0447600710 0.0777385217 -0.3501573087 0.3642260004 0.2028661206 0.2230605796 0.3806834419 0.3523455645 -0.3611485827 -0.2025145215 0.0000051856 -0.0000050117 -0.0000035272 0.0000647295 0.0002047198 -0.0000039473 -0.0000082386 -0.0000203652 0.0000004171 0.0000085564 -0.0000049798 -0.0000049847 -0.0000396888 0.0000402458 0.0000262271 -0.0000435604 -0.0000213267 -0.0000204246 0.0000085013 0.0000007310 0.0000050869 0.0000000682 0.0000261082 0.0000011598 0.0000040457 0.0000034691 0.0000033508 -0.0000121862 -0.0002585867 -0.0000132565 0.0000576113 0.0000193805 -0.0000106201 0.0000737049 -0.0000489393 0.0000126721 -0.0000739410 0.0000090256 0.0000208735 0.0000071932 -0.0000182124 -0.0000126145 -0.0000579858 0.0000616777 0.0000625266 -0.0127915827 -0.0059202184 -0.0060469055 0.0000159880 -0.0004309299 -0.0006881534 -0.0000361681 0.0000158261 0.0000739460 0.0000066629 0.0000589831 -0.0000166728 0.0000534090 0.0000893675 0.0000495419 0.0000113107 -0.0000035007 -0.0000208499 0.0000061179 -0.0000142081 -0.0000127549 -0.0001006574 -0.0000045547 0.0000432139 0.0000913326 -0.0000275797 -0.0001658781 0.0000897180 0.0001127041 -0.0000099038 0.0000036407 0.0000138782 0.0000472898 0.0011518155 0.0005437233 0.0003603929 -0.0002126549 -0.0000837677 -0.0000383657 0.0009379232 0.0010610370 0.0005229407 -0.0000272594 -0.0000271146 0.0000333284 -0.0000078829 -0.0000083325 0.0000066579 0.0000371754 0.0000251490 0.0000114851 0.0004866431 0.0002594700 -0.0004825282 0.0000755258 0.0000570519 0.0000753456 0.0000250763 0.0000073646 -0.0000217609 -0.0004766822 -0.0003694050 -0.0002038682 -0.0054553387 -0.0023274536 0.0047947721 -0.0006228623 -0.0007815302 -0.0004356830 -0.0002714560 -0.0001451969 0.0002294590 -0.0000041461 -0.0000228659 -0.0000348432 -0.0006896841 -0.0008520042 -0.0023161251 0.0092023972 0.0133680788 0.0349365897 0.0000014354 -0.0000041527 0.0000027986 0.0000122083 0.0001798684 -0.0001035553 -0.0000885877 -0.0000916523 -0.0002109808 0.0002200799 0.0001164748 0.0001335140 -0.0003411320 0.0000691228 -0.0004277386 -0.0043299336 -0.0021503790 -0.0002329054 -0.0077289758 0.0039887105 0.0148017186 -0.0496660285 0.0231477629 -0.0657549324 0.0000205471 0.0000090228 -0.0000037161 0.0003074565 -0.0006498618 0.0005792879 0.0152642739 -0.0069680283 -0.0133963787 0.0003096417 0.0239661956 0.0014853228 0.0369653752 0.0094784147 0.0179217768 0.0964778412 -0.0729543672 -0.0632135067 0.0027050590 0.0384712770 -0.1151262362 -0.0051938407 -0.0147125901 0.0014166850 0.0000643294 0.0299108582 -0.0018205311 0.6181877875 0.0077703106 0.2582158015 -0.0218329477 -0.3141838783 0.5337187389 -0.0015098049 0.0057175571 -0.0008689875 -0.0038349849 0.0005033928 -0.0063089993 0.0011581952 0.0005232485 0.0001845711 0.0000067966 0.0000040594 -0.0000033156 -0.0000057748 0.0000002917 0.0000023203 0.0000051348 0.0000005842 -0.0000010154 -0.0000070775 -0.0000026075 0.0000010900 0.0000043912 0.0000009579 -0.0000009215 -0.0000102599 -0.0000075942 -0.0000055357 0.0000286568 0.0000038070 -0.0000058459 -0.0000006054 -0.0000248508 0.0000016101 0.0000165579 0.0000013968 0.0000017337 0.0000113865 -0.0000129042 0.0000091910 0.0000903436 0.0000973041 0.0000605219 -0.0000063696 -0.0000034595 -0.0000104397 -0.0000081046 0.0000135054 0.0000333185 -0.0000142888 0.0000019352 -0.0000070234 0.0000109278 -0.0000047625 -0.0000103604 -0.0000076173 0.0000134678 0.0000059061 0.0000776543 0.0000053256 0.0001333111 0.0002092988 -0.0001547867 -0.0002634434 0.0000070891 -0.0000051433 -0.0000429640 -0.0000244757 0.0000009289 0.0000485958 0.0000391672 -0.0000735656 -0.0000624687 -0.0000042353 0.0000009740 0.0000011713 -0.0000073309 -0.0000003082 -0.0000046879 0.0000018580 -0.0000019797 0.0000162571 -0.0000111856 0.0000030386 0.0000233195 0.0000022265 -0.0000016126 -0.0000014596 -0.0000027849 0.0000044682 0.0000011964 -0.0000022915 -0.0000055490 0.0000003408 0.0000025487 -0.0000024700 -0.0000022882 0.0000225763 0.0000786590 -0.0000057134 -0.0000102868 0.0000201382 0.0000028594 0.0000016514 0.0000030365 -0.0000012816 0.0000105439 0.0000043523 -0.0000061963 -0.0000167386 -0.0000427883 -0.0000023948 -0.0001132406 -0.0000399499 0.0000599331 -0.0000035180 -0.0000023500 -0.0000019979 0.0000017009 0.0000011135 0.0000005524 0.0000025626 0.0000123764 -0.0000000648 0.0000010558 -0.0000022672 0.0000005813 -0.0000150447 -0.0001201584 0.0000087737 -0.0000167974 0.0000222342 -0.0000171242 0.0000006576 0.0000165289 -0.0000004695 0.0000029696 0.0000008993 0.0000016429 -0.0000173941 -0.0001855792 -0.0000033463 -0.0000132197 -0.0000022188 -0.0000102477 0.0004732624 0.0000708640 -0.0000887210 -0.0031117912 -0.0025752020 0.0012838167 0.0003163019 0.0005500119 0.0000621660 -0.0015419056 0.0012739582 0.0007575931 -0.0207254642 0.0155563392 -0.0171064415 0.0299104269 -0.1350514929 0.1405627400 0.0783294689 0.0854857536 0.1461833565 0.1383985920 -0.1416946399 -0.0792801618 0.0000111848 -0.0000104864 -0.0000047071 0.0000663716 0.0002262944 -0.0000055095 -0.0000095689 -0.0000226498 0.0000004722 0.0000126805 -0.0000070003 -0.0000072456 -0.0000530309 0.0000468485 0.0000421759 -0.0000783363 -0.0000432900 -0.0000347588 0.0000131371 0.0000005209 0.0000097314 -0.0000002499 0.0000442665 0.0000018422 0.0000031322 0.0000030861 0.0000054204 -0.0000091647 -0.0004308846 -0.0000104456 0.0000989302 0.0000076488 -0.0000506116 0.0000977758 -0.0001145479 -0.0000294627 -0.0001043786 0.0002380870 0.0001850976 0.0000668314 -0.0002023936 -0.0001383547 -0.0000967760 -0.0001198653 -0.0001168400 -0.0052145157 -0.0023902027 -0.0022613815 -0.0000125863 0.0002453300 0.0003695587 0.0000038884 -0.0000139484 -0.0000311559 -0.0000282004 -0.0000216763 -0.0000198396 -0.0000265705 -0.0000379084 -0.0000002236 0.0000016822 0.0000023780 -0.0000023279 -0.0000227111 -0.0000055589 0.0000432773 0.0000633007 0.0001634249 0.0000203172 0.0001924385 0.0000903028 -0.0001796912 -0.0001301173 -0.0001694578 -0.0000060514 0.0003189132 0.0000894840 -0.0004250811 0.0004367107 0.0002571585 0.0001462829 -0.0000928212 -0.0001260078 -0.0000065726 0.0011254411 0.0009728363 0.0003553555 -0.0000170825 -0.0000037800 0.0000308019 -0.0000017714 0.0000122962 0.0000436568 -0.0000333587 -0.0000134338 0.0000130378 0.0006780310 0.0003411189 -0.0006844390 0.0004437887 0.0002595333 0.0003122835 -0.0000189765 -0.0000113820 -0.0000155270 -0.0000394602 -0.0000163147 0.0000302267 -0.0073835262 -0.0030512150 0.0068570835 -0.0046101890 -0.0046110004 -0.0025057610 0.0000182108 -0.0000195686 -0.0000190115 -0.0000071595 -0.0001335039 -0.0003964170 -0.0000137505 -0.0000206202 0.0000615074 -0.0010292282 0.0001223944 -0.0009870400 0.0000051520 -0.0000130487 0.0000049043 -0.0000731037 0.0001621692 -0.0000242851 0.0000614355 -0.0001191045 -0.0002905923 0.0001903279 0.0002803768 0.0000783300 -0.0003131767 -0.0004209679 0.0003809282 -0.0015704801 0.0002164548 0.0004036684 -0.0318512412 -0.0243775617 0.0772412230 0.0082937018 -0.0151284261 0.0180742523 -0.0000183029 0.0000135079 0.0000169008 -0.0000045628 0.0001339136 -0.0001131502 0.0108787081 -0.0047904634 -0.0100480364 -0.0001505466 0.0011509291 0.0000530026 0.0072711687 0.0019302894 0.0031762672 0.2886106265 -0.2220708779 -0.1846126925 0.0136157331 0.2452873245 -0.7520110880 0.0817490639 0.2739972693 0.0093049003 0.0197260861 0.0766430569 0.0201543479 -0.1227210022 -0.0026398791 -0.0516417895 0.0072193114 0.1084649761 -0.1868431652 0.0002015435 -0.0008811058 0.0001495533 0.0007909131 -0.0000871276 0.0012927855 -0.0007938222 -0.0005015873 -0.0000429049 0.0000019491 0.0000045017 -0.0000009228 -0.0000013758 -0.0000002134 0.0000000189 -0.0000002295 -0.0000021951 -0.0000026025 -0.0000036229 -0.0000010730 0.0000006873 0.0000085375 -0.0000029498 -0.0000084146 -0.0000113265 -0.0000111082 -0.0000071667 0.0000007899 0.0000089670 -0.0000010147 0.0000126910 0.0000102607 0.0000065743 0.0000139101 0.0000039002 0.0000009544 -0.0000395689 0.0000449022 0.0000913481 0.0001011105 0.0001478542 0.0000838158 -0.0000237501 -0.0000151668 -0.0000530083 -0.0000422315 0.0000460300 0.0001335694 -0.0000357566 -0.0000344485 -0.0000018376 0.0000273768 -0.0000243644 -0.0000239515 -0.0000190755 0.0000258221 0.0000036643 0.0002520874 0.0000556795 0.0005393578 0.0000316765 -0.0007604525 -0.0005390857 0.0000115067 0.0000116013 -0.0000846366 0.0000257344 -0.0000305506 -0.0000073493 0.0000375650 -0.0001125464 -0.0000695182 -0.0000037499 -0.0000013951 0.0000015938 -0.0000066660 -0.0000009684 -0.0000026584 0.0000054406 0.0000039356 0.0000220984 -0.0000441083 -0.0000398778 0.0000505562 0.0000019285 -0.0000017106 -0.0000012865 -0.0000028349 0.0000063717 0.0000016318 -0.0000045613 -0.0000124983 0.0000010434 0.0000070687 -0.0000061365 -0.0000049583 0.0000365817 0.0001630226 -0.0000077785 -0.0000499412 0.0000547660 0.0000283001 0.0000028567 0.0000083336 -0.0000010407 0.0000140395 0.0000048717 -0.0000079301 -0.0000300298 -0.0001097998 0.0000102377 -0.0001456464 -0.0000576888 0.0000776022 -0.0000075477 -0.0000026776 -0.0000039246 0.0000037300 0.0000017233 0.0000006255 0.0000020145 -0.0000093001 0.0000022984 0.0000037982 -0.0000037358 0.0000020641 -0.0000061209 0.0001104455 -0.0000348719 -0.0000473771 0.0000422480 -0.0000362808 0.0000005895 0.0000175710 -0.0000009243 0.0000036415 0.0000019024 0.0000017663 -0.0000154808 -0.0001989419 -0.0000022598 -0.0000144630 -0.0000060301 -0.0000107485 0.0003657102 -0.0001933368 -0.0000129822 -0.0009999619 -0.0010004191 0.0004567567 -0.0003737200 0.0014390280 -0.0010782410 -0.0021426297 0.0017629553 0.0013052619 -0.0129850971 0.0100892453 -0.0097142998 0.0178785139 -0.0809453490 0.0842499578 0.0465363629 0.0496535095 0.0854785874 0.0907451665 -0.0925037322 -0.0515468015 -0.0000244632 0.0000629194 0.0000513354 -0.0016380184 -0.0063456821 -0.0001730765 0.0001841160 0.0005857434 -0.0000098690 -0.0001277549 0.0000660050 0.0000738217 0.0006176888 -0.0006574192 -0.0003593934 0.0005013253 0.0002364642 0.0002402639 -0.0001059865 0.0000014986 -0.0000634715 -0.0000071337 -0.0003045881 -0.0000066174 -0.0000625356 -0.0000497831 -0.0000327614 0.0001968487 0.0031725805 0.0001438506 -0.0006893318 -0.0003591561 0.0000095513 -0.0011062260 0.0004135731 -0.0004641949 0.0013236580 0.0011875820 0.0007001982 -0.0000775820 -0.0008744045 -0.0005282964 -0.0004951227 -0.0009237626 -0.0020956500 0.4043020133 0.1848282053 0.1735295485 -0.0007796863 0.0218919230 0.0333237139 0.0008953462 -0.0011817444 -0.0030771962 -0.0002233194 -0.0016359461 -0.0002194446 -0.0021465648 -0.0031329997 -0.0007476054 0.0004965540 0.0009670877 0.0003324060 -0.0014004886 0.0002023176 0.0026708414 0.0037657944 0.0051691481 -0.0001686027 0.0068719312 0.0044804829 -0.0057203689 -0.0137547223 -0.0170584619 -0.0005199599 0.0159202100 0.0046552065 -0.0232189903 -0.0331437159 -0.0149342399 -0.0123907649 0.0078521686 0.0056432166 0.0030632823 -0.0702817613 -0.0523605115 -0.0295841443 -0.0001088430 -0.0000973346 -0.0003829601 -0.0000196988 -0.0000576098 -0.0001757180 -0.0001344455 -0.0001156523 -0.0000116534 -0.0006371953 -0.0003417207 0.0006510790 0.0000384871 0.0000103302 -0.0000697396 0.0000919186 0.0000568642 -0.0000704601 0.0016331318 0.0012897102 0.0010177959 0.0070513455 0.0029060202 -0.0075155210 -0.0005196056 -0.0002861815 0.0001867792 -0.0010715323 -0.0005217089 0.0009505454 0.0000638067 0.0004706827 0.0019831564 0.0142964988 0.0172722283 0.0506811726 -0.2311597881 -0.2794755361 -0.7703431273 0.0000013085 0.0000430773 -0.0000131415 0.0006621934 -0.0006333774 -0.0002238256 -0.0005793378 0.0001196586 0.0006811790 -0.0000051060 -0.0002128758 -0.0002049375 -0.0000165239 0.0000964777 -0.0000130108 -0.0017808412 0.0009559232 0.0009161737 0.0016199639 -0.0014709698 -0.0023797985 -0.0001012495 0.0000594787 -0.0001667589 0.0002356656 0.0001145450 -0.0000467278 0.0002415940 -0.0002474466 0.0006046896 0.0152610961 -0.0064780792 -0.0135897161 -0.0007373267 -0.0072960610 -0.0001117947 0.0069612054 0.0019667148 0.0032786530 -0.0214205187 0.0155012080 0.0130344228 -0.0002571815 -0.0050724812 0.0153237419 0.0020529906 0.0067163775 -0.0002196605 -0.0000742897 -0.0003369845 -0.0001474979 0.0015096885 0.0000529691 0.0006269777 -0.0001194281 -0.0007691780 0.0014700738 -0.0005094560 0.0021812178 -0.0004464852 -0.0034988817 0.0006479017 -0.0062154123 0.0005336732 0.0003007761 -0.0000275172 -0.0000987562 -0.0000828092 0.0000120872 0.0000653209 0.0000441014 0.0001093958 -0.0000962588 -0.0000206287 -0.0000129366 0.0000764537 0.0000091408 -0.0000263867 -0.0000201691 0.0000220979 0.0000154238 0.0001218772 0.0001455130 0.0001378669 0.0000482044 -0.0004906573 -0.0016513653 0.0002424194 0.0003798389 -0.0003501543 -0.0001061567 -0.0000749766 -0.0001011539 0.0000467860 -0.0000535273 0.0001386701 -0.0013203205 -0.0016437142 -0.0010959820 0.0000537563 -0.0000024379 0.0000962823 -0.0000304680 0.0000205115 -0.0000013830 0.0000488325 -0.0000226983 0.0000088686 -0.0000817470 0.0000256757 -0.0000597716 0.0001158996 -0.0001736043 -0.0001465824 -0.0004000546 0.0000548008 -0.0008429801 0.0000665166 -0.0000446360 -0.0000865095 -0.0000825405 0.0000409877 -0.0000725306 0.0003668335 -0.0000284551 0.0004767489 -0.0009451552 0.0018004087 0.0014019495 0.0000069118 0.0000229616 0.0000570508 0.0000654348 0.0000490037 0.0000931149 0.0000358842 -0.0000127080 0.0000508523 0.0000194751 -0.0000158028 0.0000144366 -0.0000342747 0.0000216857 0.0000245526 0.0000488901 -0.0000645620 -0.0000321794 0.0001199870 0.0004053264 -0.0000172485 -0.0000780134 0.0000553547 0.0000572279 -0.0011609991 -0.0047714673 0.0000180370 0.0003834311 -0.0004344542 -0.0003212619 -0.0000197450 -0.0000073152 0.0000167460 -0.0001410469 -0.0000590767 0.0000811952 0.0001481754 0.0002696632 -0.0001083092 0.0014732855 0.0006138246 -0.0008873530 0.0000415762 0.0000344477 0.0000250041 -0.0000171784 -0.0000111920 -0.0000114144 -0.0000124998 0.0000147300 -0.0000056913 -0.0000958034 0.0000850220 -0.0000605925 0.0000508043 -0.0003021435 0.0000074196 0.0010270503 -0.0008938079 0.0006603991 -0.0000067649 -0.0001956833 0.0000073524 -0.0000731777 -0.0000288674 -0.0000390248 0.0002296726 0.0023013211 0.0000015747 0.0005362396 0.0002718451 0.0002665310 -0.0032023829 -0.0013962203 0.0017089107 0.0299904520 0.0214195815 -0.0114660119 -0.0022034053 0.0041144618 -0.0028758994 0.0104643336 -0.0092556692 -0.0068551363 -0.0063886784 -0.0012623876 -0.0132325971 0.0114253888 -0.0496860982 0.0491146085 0.0608086604 0.0675961895 0.1164718467 0.0024318137 -0.0046009749 -0.0086368771 0.0000000043 -0.0000022030 -0.0000008708 0.0000068072 0.0000406230 0.0000020257 -0.0000012767 -0.0000024582 0.0000009922 0.0000015187 -0.0000012916 -0.0000009402 -0.0000093657 0.0000085571 0.0000042782 -0.0000094926 -0.0000048308 -0.0000057014 0.0000014628 -0.0000012132 0.0000017117 0.0000008753 0.0000129738 0.0000011221 0.0000011105 0.0000000192 0.0000004724 -0.0000060788 -0.0001307656 -0.0000061062 0.0000146058 0.0000094427 -0.0000015450 0.0000155317 -0.0000035756 0.0000047218 -0.0000212227 -0.0000207031 -0.0000093634 0.0000033901 0.0000161691 0.0000052821 0.0000165313 0.0000191139 0.0000259067 -0.0033997217 -0.0016007071 -0.0014741102 0.0000120668 -0.0001631018 -0.0002521757 -0.0000091498 0.0000036884 0.0000263886 -0.0000089987 0.0000401683 0.0000117541 0.0000327887 0.0000385624 0.0000000754 -0.0000040674 -0.0000140504 -0.0000085054 0.0000014378 0.0000080420 -0.0000329947 -0.0000582393 -0.0000635568 -0.0000066053 -0.0001475044 -0.0000795098 0.0001490238 0.0001618667 0.0002044707 0.0000143107 -0.0001645989 -0.0000420218 0.0002633431 0.0002802978 0.0001105714 0.0001185420 0.0000064997 0.0000128167 -0.0000694603 -0.0004004385 0.0000768578 -0.0000287771 -0.0000547244 -0.0000602104 0.0001595028 0.0000162904 0.0000689404 0.0000580520 0.0008881207 0.0004653579 0.0003066419 -0.0000086386 0.0000112801 -0.0000678778 -0.0000267801 -0.0000038168 0.0000184703 -0.0001284503 -0.0001349188 0.0000488826 -0.0080520114 -0.0060636320 -0.0036979939 -0.0003247275 -0.0001117041 0.0003452674 0.0003799292 0.0002742139 0.0001918263 0.0013632651 0.0007060536 -0.0013715385 0.0000348000 -0.0001882708 -0.0007729098 -0.0001535599 -0.0001858015 -0.0005641644 0.0026298469 0.0030631232 0.0086098597 0.0000012387 -0.0000021724 0.0000011780 0.0000157645 -0.0000950525 0.0001829882 0.0001068073 0.0000917265 -0.0003104819 0.0000247833 0.0001963808 -0.0001535522 0.0000392341 -0.0000138577 0.0000272078 -0.0004636021 0.0003325739 0.0002846794 -0.0000810295 0.0000372294 0.0001017379 0.0005331816 -0.0001094928 0.0005720288 -0.0001538740 0.0003863646 -0.0003092231 0.0320897048 -0.0692974562 0.0578803892 0.0044257138 -0.0019336504 -0.0038904647 -0.0002707156 -0.0026714993 -0.0000731122 0.0011897300 0.0004994083 0.0003581440 0.0008248266 -0.0006630813 -0.0005432817 -0.0000234929 0.0002370878 -0.0008270528 0.0000300532 0.0000438628 0.0000229587 -0.0003659527 -0.0020129411 -0.0003314716 -0.0073704337 -0.0010436625 -0.0032456922 0.0003366322 0.0024271114 -0.0039608595 -0.1811669729 0.6618930298 -0.0973969220 -0.3481901160 0.0583056448 -0.5906298174 0.1463627689 0.0987930043 0.0083295799 -0.0000014114 0.0000006507 0.0000012168 0.0000055895 -0.0000028620 -0.0000113036 0.0000015627 0.0000020898 0.0000048499 0.0000028314 0.0000003432 0.0000000324 0.0000018396 -0.0000029937 -0.0000074934 0.0000024279 -0.0000003597 -0.0000008079 -0.0000503652 0.0000431853 0.0001326796 -0.0000255096 -0.0000238319 -0.0000027475 -0.0000142281 0.0000000821 0.0000033001 -0.0000454282 0.0000227771 0.0000526316 -0.0000114643 -0.0000090664 -0.0000154274 -0.0000054635 0.0000009947 -0.0000068108 0.0000011617 0.0000005434 0.0000033795 -0.0000034257 0.0000026423 -0.0000012864 0.0000041249 -0.0000010548 0.0000030324 -0.0000040981 0.0000044784 0.0000015158 0.0000394566 0.0000035163 0.0000780984 0.0000134756 -0.0000112188 -0.0000065011 0.0000162359 -0.0000061182 0.0000039686 -0.0000152193 -0.0000132158 -0.0000458875 0.0000197018 -0.0000436271 -0.0000274043 0.0000069383 -0.0000019949 -0.0000037090 0.0000078745 0.0000001237 -0.0000000369 -0.0000069343 0.0000003614 -0.0000041806 -0.0000063824 0.0000026806 0.0000013779 0.0000002403 0.0000001254 -0.0000006644 -0.0000001689 0.0000008711 0.0000002744 -0.0000027086 -0.0000075845 0.0000004723 0.0000039982 -0.0000030238 -0.0000027378 0.0000206784 0.0000945303 -0.0000018451 -0.0000312891 0.0000330927 0.0000204697 0.0000001520 0.0000020585 0.0000000222 0.0000062948 0.0000019758 -0.0000036724 -0.0000046012 -0.0000284519 -0.0000010514 -0.0000629398 -0.0000259229 0.0000354241 -0.0000014350 0.0000001478 -0.0000007458 0.0000005390 0.0000002216 0.0000000476 0.0000009193 0.0000023719 0.0000002503 0.0000022705 -0.0000025698 0.0000014251 -0.0000041523 -0.0000295951 -0.0000018652 -0.0000296646 0.0000241713 -0.0000205073 0.0000006053 0.0000067164 -0.0000001022 0.0000001538 -0.0000000200 0.0000000081 -0.0000059534 -0.0000758857 -0.0000004824 0.0000039819 0.0000011709 0.0000013435 -0.0058882367 -0.0002978223 0.0034321017 0.0409045464 0.0294839074 -0.0157134089 -0.0021707623 0.0028346016 -0.0026147172 0.0315580207 -0.0289660414 -0.0228567317 0.0003464505 -0.0007455052 -0.0002923865 -0.0003959764 0.0023437290 -0.0025184348 0.0017012256 0.0014468619 0.0028108895 -0.0051171855 0.0055187739 0.0030129225 0.0000006980 -0.0000037717 -0.0000025571 0.0000896157 0.0003603719 0.0000091101 -0.0000098132 -0.0000322672 0.0000005569 0.0000062338 -0.0000037622 -0.0000036083 -0.0000313364 0.0000323546 0.0000173094 -0.0000233271 -0.0000110599 -0.0000122693 0.0000046865 -0.0000003982 0.0000032139 0.0000013298 0.0000252650 0.0000017515 0.0000031042 0.0000010003 0.0000011988 -0.0000151490 -0.0002595458 -0.0000090603 0.0000373867 0.0000220081 -0.0000031752 0.0000538865 -0.0000180311 0.0000210703 -0.0000644036 -0.0000686274 -0.0000334081 0.0000021981 0.0000474000 0.0000202473 0.0000353240 0.0000679640 0.0000956730 -0.0155333547 -0.0074249371 -0.0067512845 0.0000394942 -0.0004240282 -0.0006985703 -0.0000126028 -0.0000101750 0.0001160141 -0.0002031976 0.0003074462 0.0000194316 0.0001475752 0.0001332971 -0.0000027692 0.0000404536 -0.0000358641 -0.0000668658 -0.0000857646 0.0001443221 -0.0002028211 -0.0003760216 -0.0002103055 -0.0000921374 -0.0005616092 -0.0003245930 0.0005737265 0.0001668291 0.0002166731 0.0000095304 -0.0006305885 -0.0003066343 0.0012509539 0.0014639838 0.0005237999 0.0004937997 -0.0005311352 -0.0003424586 -0.0000771930 0.0041414032 0.0044864159 0.0010345982 0.0000382684 0.0000115218 0.0000058298 -0.0000065369 -0.0000032423 0.0000196786 0.0000681649 0.0000747815 0.0000410715 0.0001421517 0.0000793249 -0.0001260672 0.0000081935 0.0000100818 0.0000031211 -0.0000121523 -0.0000017020 0.0000129461 -0.0009185549 -0.0008444498 -0.0005352261 -0.0017122790 -0.0008197597 0.0015196518 0.0000132808 -0.0000050630 0.0000042808 0.0001944216 0.0001143355 -0.0001557965 0.0000029832 -0.0000458021 -0.0001790128 -0.0006670643 -0.0008125990 -0.0024940362 0.0118896197 0.0135569374 0.0381992832 0.0000027998 -0.0000030355 0.0000038390 -0.0002889077 -0.0000064859 0.0005546078 -0.0007635558 -0.0003879937 -0.0003986679 0.0001123911 0.0000160005 -0.0000046758 0.0000069588 -0.0000079889 0.0000240437 0.0033727098 -0.0019918662 -0.0018468799 -0.0002063351 0.0001579439 0.0002608106 -0.0000946795 -0.0000223824 -0.0000746766 0.0001820515 0.0002553857 0.0002546871 -0.0023215186 0.0047698841 -0.0044005155 -0.0305729908 0.0130149363 0.0268293222 0.0013189908 0.0146226296 0.0004797959 -0.0112082574 -0.0032503002 -0.0054816671 0.0025727678 -0.0020246547 -0.0017437137 -0.0000054926 0.0005683251 -0.0017682108 -0.0002205957 -0.0006395584 0.0000040128 0.0001507387 0.0005827565 0.0001244059 0.0010917094 0.0000401789 0.0004951291 -0.0000347462 -0.0002377482 0.0003391829 0.0123012056 -0.0453115007 0.0066975336 0.0264299383 -0.0044252782 0.0456851265 -0.0100128651 -0.0066633283 -0.0005596421 0.0000034907 0.0000044515 0.0000012923 0.0000058414 -0.0000083026 -0.0000251729 0.0000031118 0.0000012248 -0.0000015446 -0.0000013571 0.0000002271 0.0000024766 0.0000004329 -0.0000029160 -0.0000050733 -0.0000055852 -0.0000085478 -0.0000104896 -0.0000898102 0.0000894271 0.0003092680 -0.0000035127 -0.0000152137 0.0000561637 -0.0000053597 0.0000010232 -0.0000023862 -0.0000218106 0.0000067978 0.0000128775 0.0000764483 0.0000915235 0.0000695903 -0.0000049404 -0.0000007398 -0.0000092170 0.0000002164 0.0000019075 0.0000034389 -0.0000074976 0.0000041410 0.0000000370 0.0000053623 -0.0000033548 0.0000016112 -0.0000091017 0.0000096197 0.0000059052 0.0000404853 -0.0000021046 0.0000837019 0.0000167324 -0.0000297557 -0.0000329844 0.0000026022 0.0000034673 0.0000113507 0.0000194558 0.0000349868 -0.0000012514 0.0000716086 -0.0000997186 -0.0000725193 0.0000016141 -0.0000008301 -0.0000008974 0.0000039792 -0.0000025698 -0.0000003453 -0.0000013952 0.0000004583 -0.0000056340 -0.0000007751 -0.0000048911 -0.0000044171 0.0000019973 -0.0000009025 -0.0000016940 -0.0000018195 0.0000035342 0.0000012862 -0.0000061524 -0.0000200244 0.0000006811 0.0000032559 -0.0000019829 -0.0000026300 0.0000583909 0.0002406085 -0.0000033192 -0.0000092355 0.0000142688 0.0000081267 0.0000004758 0.0000008147 -0.0000006461 0.0000119616 0.0000046887 -0.0000070738 -0.0000056161 -0.0000183311 0.0000013071 -0.0001249749 -0.0000499069 0.0000741662 -0.0000022146 -0.0000012411 -0.0000009872 0.0000011243 0.0000003270 0.0000006325 0.0000013740 0.0000054281 0.0000001403 0.0000056135 -0.0000055337 0.0000036854 -0.0000092529 -0.0000582922 0.0000060308 -0.0000679652 0.0000566209 -0.0000430358 0.0000005400 0.0000086932 -0.0000001148 0.0000009003 0.0000005037 0.0000006106 -0.0000092448 -0.0001000835 0.0000039941 -0.0000004882 -0.0000014269 0.0000029966 -0.0817130921 -0.0029656469 0.0455450959 0.5623799118 0.4080199681 -0.2166672143 -0.0196679411 0.0197676050 -0.0142891276 0.4354569004 -0.3982035749 -0.3146792254 0.0003327734 -0.0033714166 -0.0047004075 0.0016182278 -0.0045457544 0.0045844682 0.0212375056 0.0210056381 0.0377165715 -0.0222849166 0.0246844295 0.0130747777 0.0000000410 0.0000016319 0.0000009325 -0.0000322074 -0.0001387897 -0.0000032800 0.0000036725 0.0000118818 -0.0000003852 -0.0000018057 0.0000018633 0.0000013728 0.0000116171 -0.0000115992 -0.0000061605 0.0000114325 0.0000065536 0.0000069083 -0.0000018339 0.0000003852 -0.0000019631 -0.0000009058 -0.0000144822 -0.0000021904 -0.0000008580 0.0000001217 -0.0000016765 0.0000030374 0.0001375818 0.0000012095 -0.0000157697 -0.0000110103 0.0000011934 -0.0000204628 0.0000050459 -0.0000080645 0.0000288074 0.0000289783 0.0000144894 -0.0000015241 -0.0000235329 -0.0000093827 -0.0000220392 -0.0000185183 -0.0000388355 0.0071142781 0.0032748720 0.0029856605 -0.0000169247 0.0005343102 0.0008134282 0.0000168959 -0.0000299311 -0.0000743381 0.0000044727 -0.0000415159 -0.0000107217 -0.0000583347 -0.0000670327 0.0000032567 0.0000171731 0.0000312341 0.0000092839 -0.0000382132 -0.0000095409 0.0000807041 0.0000904100 0.0001269082 0.0000062440 0.0003175308 0.0001543221 -0.0003250125 -0.0003837595 -0.0004811521 -0.0000158014 0.0005170807 0.0001615496 -0.0007321500 -0.0006100956 -0.0002596784 -0.0001980900 0.0001730030 0.0000434360 0.0000581925 -0.0010589520 -0.0007701545 -0.0005053342 -0.0000074181 0.0000011499 -0.0000056984 -0.0000005407 0.0000006268 0.0000007507 -0.0000060335 -0.0000062389 -0.0000028067 0.0000523792 0.0000275306 -0.0000453700 -0.0000139781 -0.0000121695 -0.0000050558 0.0000054122 0.0000019122 -0.0000042199 0.0000479428 0.0000435392 0.0000379974 -0.0005988698 -0.0002476777 0.0004660394 0.0001836557 0.0001451995 0.0000719159 -0.0000675608 -0.0000415579 0.0000597626 0.0000015451 -0.0000040410 -0.0000239955 0.0002498092 0.0002884147 0.0009007864 -0.0043109792 -0.0048731740 -0.0137849739 -0.0000015515 0.0000046840 -0.0000050491 0.0000595966 0.0001250246 -0.0001371823 0.0000444391 -0.0000370157 -0.0000931699 -0.0000264569 0.0002002624 -0.0000266671 0.0003659520 -0.0003382858 0.0001035684 0.0712911416 -0.0416125000 -0.0387884252 -0.0001545371 -0.0003985842 0.0001032790 -0.0000433089 0.0000937911 -0.0000238347 -0.0000110015 -0.0000032340 -0.0000000386 0.0004177542 -0.0006841736 0.0006536746 -0.6462325799 0.2718309832 0.5674509358 0.0260855984 0.3071702649 0.0101279350 -0.2374403826 -0.0685141469 -0.1172661993 -0.0012306366 0.0005282545 0.0000438774 -0.0001225152 0.0007463623 -0.0018580429 0.0013493710 0.0044308927 -0.0001430402 0.0001851896 0.0005937322 0.0001522235 -0.0009501665 -0.0000692073 0.0000315150 -0.0003081970 -0.0012926145 0.0026639392 -0.0018947873 0.0067865834 -0.0009621046 -0.0039866262 0.0006735893 -0.0067557525 0.0008009720 0.0005316647 0.0000807831 -0.0000002800 -0.0000016397 -0.0000007895 -0.0000027505 0.0000027544 0.0000094195 0.0000006604 0.0000012341 0.0000011591 -0.0000003390 -0.0000005106 -0.0000003110 -0.0000006272 0.0000017905 0.0000027214 0.0000021996 0.0000040122 0.0000043703 0.0000373835 -0.0000337721 -0.0001100869 -0.0000126587 -0.0000141811 -0.0000294269 0.0000029119 -0.0000014027 -0.0000025479 0.0000179359 -0.0000105412 -0.0000163705 -0.0000283411 -0.0000372473 -0.0000296863 0.0000168324 -0.0000012292 0.0000278418 0.0000087023 -0.0000166981 -0.0000243578 -0.0000452605 0.0000047911 -0.0000041114 -0.0000160715 0.0000058066 -0.0000047512 0.0000096065 -0.0000183967 -0.0000044696 -0.0001590574 -0.0000404283 -0.0003398367 -0.0001423801 0.0001522380 0.0001116045 -0.0000918402 0.0000313877 -0.0000811054 0.0002694680 0.0001012519 0.0001668736 -0.0000269842 0.0000637143 0.0000741237 -0.0000014842 0.0000010016 0.0000023908 -0.0000009081 0.0000009707 0.0000015473 0.0000836250 0.0000407492 0.0000577099 -0.0000218072 -0.0000720025 0.0000051674 -0.0000006682 0.0000001152 0.0000006658 0.0000002869 -0.0000013224 -0.0000004138 0.0000027703 0.0000088896 -0.0000003324 -0.0000011798 0.0000003052 0.0000008649 -0.0000247571 -0.0001067620 0.0000020991 0.0000014823 -0.0000017422 -0.0000012537 -0.0000008425 -0.0000044368 0.0000000727 -0.0000026378 -0.0000005334 0.0000015367 0.0000097882 0.0000549401 -0.0000052479 0.0000229984 0.0000107004 -0.0000145685 0.0000016091 0.0000001363 0.0000005955 -0.0000010503 -0.0000002611 0.0000000868 0.0000002557 0.0000077546 -0.0000008742 -0.0000023196 0.0000019206 -0.0000015947 -0.0000036145 -0.0000790801 0.0000117025 0.0000293993 -0.0000207916 0.0000172663 0.0000000986 0.0000039895 -0.0000002361 0.0000022306 0.0000002548 0.0000010633 -0.0000067552 -0.0000461230 -0.0000040760 -0.0000223076 -0.0000086838 -0.0000148536 0.0038001055 0.0001640133 -0.0021429278 -0.0262740450 -0.0191650244 0.0101496258 0.0012321809 -0.0011472231 0.0011436400 -0.0202457447 0.0185556736 0.0146206789 -0.0027936048 0.0033341228 -0.0047310283 0.0100185465 -0.0471677120 0.0448652963 0.0108675393 0.0125217579 0.0200164356 0.0143861569 -0.0159168894 -0.0091028250 0.0000007809 -0.0000050287 -0.0000025478 0.0003190831 0.0013474307 0.0000623056 -0.0000317303 -0.0001228284 -0.0000012173 0.0000123668 -0.0000065564 -0.0000055112 -0.0000571022 0.0000596499 0.0000373497 -0.0000418282 -0.0000222965 -0.0000166979 0.0000087312 -0.0000000168 0.0000056940 -0.0000014352 0.0000033877 -0.0000011513 0.0000055186 0.0000041251 0.0000022982 0.0000112029 -0.0000327090 0.0000017379 0.0000502615 0.0000137081 -0.0000165499 0.0001007801 -0.0000516829 0.0000286309 -0.0000910935 -0.0000425705 -0.0000021818 0.0000465710 0.0000028695 -0.0000079054 0.0000941560 0.0000031132 0.0001697314 -0.0475078483 -0.0234732436 -0.0189979519 0.0001171541 -0.0052623036 -0.0078442388 -0.0000928498 0.0003651433 0.0006850301 0.0000945174 0.0001856694 0.0000601236 0.0003633398 0.0004713162 0.0000097353 -0.0002302141 -0.0003114826 -0.0000103103 0.0004222482 0.0000366954 -0.0006954443 -0.0006012477 -0.0012150676 -0.0000787253 -0.0021696565 -0.0010179616 0.0021445678 0.0039262111 0.0049306361 0.0002478222 -0.0049985104 -0.0015775610 0.0068407328 0.0036371369 0.0014795603 0.0016623021 -0.0004103718 -0.0007592389 -0.0002184554 0.0042936318 0.0035566160 0.0020598647 -0.0000515026 -0.0000951555 0.0000480743 -0.0000010985 0.0000042368 0.0000327692 -0.0000244429 -0.0000141908 -0.0000054447 0.0015369494 0.0008375074 -0.0014432989 -0.0001630896 -0.0001069508 0.0000284300 -0.0000445279 -0.0000114090 0.0000423306 0.0002465624 0.0001781035 0.0000601387 -0.0181093407 -0.0079316181 0.0145816414 0.0020771708 0.0016483984 0.0007984503 0.0004973275 0.0002807502 -0.0004255616 -0.0000036777 -0.0000218873 -0.0002101265 -0.0013116591 -0.0015502134 -0.0050477718 0.0277867799 0.0254102795 0.0772911962 -0.0000015130 -0.0000026769 0.0000030778 0.0010421771 0.0003469873 -0.0007683814 -0.0004241007 -0.0007568002 0.0002986578 0.0002298324 0.0000997926 -0.0000572485 0.0000116553 0.0000754531 0.0000991353 -0.0005792038 0.0002512033 0.0002485194 -0.0011539073 0.0009431570 0.0011863714 0.0000391146 -0.0000578922 0.0000671762 0.0000236596 0.0001087057 0.0000231224 0.0000760732 0.0005002997 -0.0001957483 0.0042549879 -0.0014514797 -0.0043860566 0.0001332287 -0.0022226179 0.0000939445 0.0028578227 0.0005516856 0.0010222038 0.0139728409 -0.0125630511 -0.0113764587 -0.0001869231 0.0024191317 -0.0066058485 -0.0015841847 -0.0037510584 0.0002352934 0.0001085703 0.0001225806 -0.0000046804 -0.0006697133 0.0000261976 -0.0002458706 0.0000927173 0.0005100983 -0.0009397889 0.0007868030 -0.0032037500 0.0005253628 0.0010993818 -0.0001984340 0.0016765454 -0.0032151189 -0.0022561606 -0.0000390979 0.0000101759 0.0000092438 0.0000026532 -0.0000067776 -0.0000067977 -0.0000187242 0.0000158098 0.0000112511 0.0000121985 -0.0000043507 0.0000009381 0.0000023518 -0.0000126854 0.0000031827 0.0000175940 -0.0000085606 -0.0000142541 -0.0000168492 -0.0000341164 0.0000585652 0.0002745194 -0.0001225328 -0.0001256187 -0.0000244883 -0.0000098849 0.0000073363 0.0000044810 0.0000817688 -0.0000613395 -0.0002512428 0.0001257870 0.0001749962 0.0001282115 -0.0000175242 -0.0000017449 -0.0000292054 0.0000135727 -0.0000120345 -0.0000097404 -0.0000000569 0.0000107256 -0.0000016512 -0.0000181717 -0.0000015900 -0.0000693947 -0.0000051767 0.0000181969 0.0000111314 0.0001583296 0.0000187133 0.0003081717 -0.0000615787 0.0001383656 0.0001393548 0.0000263792 -0.0000025421 0.0000077440 0.0003876297 0.0000262717 0.0006661935 0.0000711537 -0.0001739875 -0.0001552668 0.0000032393 -0.0000024183 -0.0000055169 0.0000027608 -0.0000056946 -0.0000055464 -0.0000109193 -0.0000018831 -0.0000089050 -0.0000078289 0.0000043319 -0.0000003936 0.0000026657 -0.0000007205 -0.0000004131 -0.0000033783 0.0000062540 0.0000031217 -0.0000322107 -0.0001272874 0.0000044693 0.0000013276 0.0000071660 0.0000006442 0.0003346119 0.0014399478 0.0000076955 0.0000703242 -0.0001038141 -0.0000192264 -0.0000021716 -0.0000279149 -0.0000007653 -0.0000157174 -0.0000042432 0.0000100933 0.0000512748 0.0002589417 0.0000107240 0.0001717375 0.0000393765 -0.0000716145 -0.0000033690 -0.0000031200 -0.0000016328 0.0000018267 0.0000009402 0.0000012532 -0.0000010925 -0.0000056712 -0.0000001277 0.0000250279 -0.0000210618 0.0000168777 0.0000014075 0.0000612317 0.0000254937 -0.0002770085 0.0002239663 -0.0001628263 -0.0000015278 -0.0000077563 -0.0000005136 0.0000056405 0.0000036670 0.0000034318 0.0000110468 0.0000645789 0.0000036172 -0.0000478612 -0.0000355920 -0.0000149518 0.0053074672 -0.0004009471 -0.0028429269 -0.0314038946 -0.0220716321 0.0122526160 0.0009117712 0.0000830878 -0.0005771965 -0.0322033634 0.0312519256 0.0247930578 0.0110686367 -0.0600094187 -0.0687667150 0.0122976211 -0.0466736682 0.0299644684 0.2985098283 0.3079629157 0.5475431292 -0.4597341963 0.4669254167 0.2424383348 0.0007034791 -0.0004241446 -0.0003909661 -0.0315644079 -0.1516082489 -0.0054442407 0.0026520530 0.0133711837 0.0005091347 -0.0000533951 -0.0000734868 0.0000293568 -0.0000602975 -0.0000017408 0.0000247675 -0.0000113913 -0.0000005509 -0.0000075836 0.0000287661 0.0000028196 -0.0000133609 0.0000255215 0.0002176770 0.0000173512 -0.0000121952 -0.0000026939 -0.0000039830 -0.0002668403 -0.0025232825 -0.0001950817 0.0000076937 -0.0000021541 0.0000057788 0.0000510173 -0.0000302333 -0.0000126980 -0.0000198962 0.0000057034 -0.0000148876 0.0000078266 -0.0000050715 0.0000010167 0.0000194962 0.0000131617 0.0000124241 0.0033592250 0.0015373028 0.0013533863 0.0000043599 0.0000975617 0.0001514976 0.0000019595 -0.0000047392 -0.0000111490 0.0000092678 -0.0000003226 -0.0000024440 -0.0000236208 -0.0000109820 0.0000208861 0.0000267813 0.0000342113 0.0000008577 -0.0000354098 -0.0000103108 0.0000477907 0.0000033222 0.0000048499 -0.0000006693 0.0002380904 0.0000745420 -0.0002644268 -0.0003216874 -0.0004071977 -0.0000187954 0.0003875867 0.0001390816 -0.0005175099 -0.0002693351 -0.0001209469 -0.0000998416 0.0001552348 0.0001027544 0.0000555892 -0.0016516851 -0.0010747756 -0.0005954539 -0.0000006624 -0.0000012739 -0.0000065750 -0.0000008430 -0.0000022582 -0.0000068541 -0.0000177743 -0.0000150604 -0.0000076994 -0.0000055920 -0.0000030091 0.0000058897 0.0000062875 0.0000048102 0.0000024888 0.0000101490 0.0000054381 -0.0000074989 0.0001992406 0.0001725443 0.0001019932 0.0000751995 0.0000210129 -0.0000799005 -0.0000794671 -0.0000584171 -0.0000302311 -0.0001149825 -0.0000588763 0.0001006798 0.0000016605 0.0000196457 0.0000795437 0.0000198333 0.0000259297 0.0000714383 -0.0003393918 -0.0004123868 -0.0010796121 -0.0000023832 0.0000011903 -0.0000013439 0.0000058522 -0.0000086762 -0.0000019087 -0.0000070912 0.0000037046 0.0000100707 -0.0000009199 -0.0000035972 -0.0000033686 -0.0000004808 0.0000011690 0.0000000427 -0.0000017400 -0.0000055376 -0.0000004685 0.0000108100 -0.0000108872 -0.0000115471 -0.0000013641 -0.0000006856 -0.0000015115 0.0000037783 0.0000011022 -0.0000013895 0.0000180586 0.0000201934 0.0000099935 0.0000032499 -0.0000043221 -0.0000056229 0.0000046361 0.0000611593 0.0000012218 0.0000194829 0.0000057779 0.0000091061 -0.0001388564 0.0001035511 0.0000855593 -0.0000017403 -0.0000213808 0.0000582281 0.0000126978 0.0000490634 -0.0000026160 -0.0000001218 0.0000037426 0.0000003500 0.0000237364 0.0000016832 0.0000098663 -0.0000014888 -0.0000019635 0.0000059257 0.0000328524 -0.0001065204 0.0000146771 -0.0000658509 0.0000153028 -0.0001175285 -0.0001931501 -0.0001448722 -0.0000052803 0.0000029060 0.0000331601 0.0000261828 0.0002107009 -0.0001684953 -0.0004746272 0.0000035741 0.0000241587 0.0000482535 0.0000024854 -0.0000010999 -0.0000084306 0.0000097258 0.0000064312 0.0000019889 -0.0000166550 0.0000025973 0.0000285748 -0.0023171115 0.0016975846 0.0053156810 -0.0003649027 -0.0004295449 -0.0004481447 -0.0000042132 -0.0000007928 0.0000014244 -0.0000219264 0.0000129844 0.0000205948 -0.0001289645 -0.0001637170 -0.0001412458 0.0000018167 -0.0000012693 0.0000012244 -0.0000007393 0.0000002873 -0.0000005243 0.0000018603 -0.0000011481 0.0000002551 -0.0000017636 0.0000008344 -0.0000006257 0.0000028521 -0.0000031882 -0.0000009928 -0.0000069529 0.0000036041 -0.0000092592 0.0000007996 0.0000002619 -0.0000003592 -0.0000029894 0.0000017099 -0.0000011070 0.0000072159 0.0000008377 0.0000091643 -0.0000134786 0.0000256822 0.0000138240 0.0000016967 0.0000004678 -0.0000015227 0.0000017715 0.0000006227 -0.0000000488 0.0000009115 -0.0000005924 0.0000011140 0.0000009872 -0.0000008850 -0.0000001137 -0.0023376025 0.0010289569 0.0013911556 0.0002733411 0.0002552412 -0.0001386074 -0.0156183761 -0.0695931159 0.0009585738 -0.0235183003 0.0276132430 0.0162899786 0.1866089854 0.8026142736 -0.0144150169 0.2983799400 -0.3161213741 -0.2032283242 -0.0015317291 -0.0050148366 0.0005063569 0.0162945409 0.0054269601 -0.0092816305 0.0147388910 0.0657400309 -0.0029154162 -0.1927162542 -0.0735483956 0.1089270327 0.0000164812 -0.0000142912 -0.0000230215 0.0000399225 0.0000092735 0.0000189471 -0.0000193776 -0.0001797124 -0.0000127589 -0.0002916887 0.0002463476 -0.0001928676 0.0002574257 0.0020751494 -0.0000147581 0.0034775076 -0.0029188163 0.0022665094 -0.0001037156 -0.0009437443 -0.0000133449 0.0004601903 0.0002528016 0.0002461338 0.0010208984 0.0109259510 0.0000711774 -0.0056541252 -0.0029347980 -0.0030212655 -0.0000021642 -0.0000029468 -0.0000023491 0.0000313257 0.0000173561 -0.0000134437 0.0000060312 -0.0000118501 0.0000144531 -0.0000215879 0.0000197783 0.0000156309 -0.0000186397 0.0000489923 0.0000381495 0.0000044891 -0.0000389042 0.0000489828 -0.0001630584 -0.0001585539 -0.0002845682 0.0003912397 -0.0004108515 -0.0002153347 -0.0000138173 0.0000078331 0.0000081195 0.0006541654 0.0030767681 0.0000999957 -0.0000560524 -0.0002744310 -0.0000095020 -0.0000257622 0.0000153945 -0.0000124728 0.0000137388 -0.0000041198 -0.0000051173 0.0000339502 -0.0002365955 0.0000126252 0.0000139352 -0.0001067688 0.0000135113 0.0038490730 0.0348849636 0.0026675270 -0.0017810338 -0.0004504695 -0.0008620612 -0.0391033121 -0.3972675363 -0.0288898094 -0.0000118879 0.0000243181 -0.0000103459 -0.0000059277 0.0000000726 0.0000009376 0.0000048209 0.0000031333 0.0000035039 -0.0000028984 -0.0000001129 0.0000023208 -0.0000027938 -0.0000033795 -0.0000028686 -0.0005623479 -0.0002563947 -0.0002288559 -0.0000001149 -0.0000023119 -0.0000072523 -0.0000001823 0.0000000713 0.0000001220 -0.0000019382 -0.0000007027 0.0000002043 0.0000021629 0.0000010560 -0.0000022476 -0.0000049441 -0.0000058157 0.0000001985 0.0000107416 0.0000035790 -0.0000141242 0.0000006261 0.0000006667 0.0000000397 -0.0000228933 -0.0000061724 0.0000265456 0.0000567802 0.0000724217 0.0000017949 -0.0001190909 -0.0000426121 0.0001556946 0.0000452233 0.0000204757 0.0000168986 -0.0000295754 -0.0000189835 -0.0000109735 0.0003176460 0.0002047444 0.0001122988 -0.0000000312 0.0000000949 0.0000012902 0.0000003331 0.0000014166 0.0000052576 0.0000025090 0.0000022034 0.0000010124 0.0000045186 0.0000021514 -0.0000040296 -0.0000008592 -0.0000008645 -0.0000000832 -0.0000039185 -0.0000020578 0.0000029949 -0.0000288817 -0.0000245320 -0.0000159234 -0.0000502569 -0.0000221267 0.0000472363 0.0000112835 0.0000110056 0.0000015779 0.0000413180 0.0000212401 -0.0000375376 -0.0000020764 -0.0000158083 -0.0000604422 -0.0000027896 -0.0000035007 -0.0000077329 0.0000401994 0.0000490261 0.0001134956 0.0000131704 0.0001095430 0.0000583091 -0.0000010522 0.0000014817 0.0000003201 0.0000022476 0.0000002484 -0.0000017431 -0.0000004226 -0.0000000606 0.0000004363 0.0000011099 0.0000001104 -0.0000002497 0.0000050547 -0.0000037379 -0.0000028339 -0.0000019928 0.0000033904 -0.0000021165 -0.0000011814 0.0000010110 -0.0000012079 -0.0000013678 -0.0000003688 0.0000004796 -0.0000088916 -0.0000095698 -0.0000043187 -0.0000477903 0.0000247473 0.0000485947 0.0000090696 0.0000310921 0.0000011106 -0.0000230414 -0.0000068780 -0.0000099502 0.0000157227 -0.0000026542 -0.0000108662 -0.0000034551 -0.0000159620 0.0000449081 0.0000020093 -0.0000244158 -0.0000077343 0.0000011452 -0.0000017818 -0.0000007838 0.0000064336 0.0000008683 0.0000040776 -0.0000003732 -0.0000104095 0.0000173107 -0.0000144267 0.0000479171 -0.0000068298 0.0000288053 -0.0000067142 0.0000513346 0.0000962469 0.0000718238 0.0000018984 0.0000010990 -0.0000014711 -0.0000015600 -0.0000054640 0.0000037239 0.0000113410 -0.0000021572 -0.0000028804 -0.0000037471 -0.0000008347 -0.0000000854 0.0000004641 0.0000009330 -0.0000005168 -0.0000012882 -0.0000020591 -0.0000024828 -0.0000023403 0.0000566047 -0.0000385084 -0.0001258953 0.0000306498 0.0000383142 0.0000350017 0.0000008314 0.0000001347 -0.0000011937 -0.0000084078 0.0000047197 0.0000126531 0.0000221712 0.0000293407 0.0000214119 -0.0004059473 -0.0001230414 -0.0007849476 -0.0000040679 0.0000430896 0.0000954345 0.0000010232 -0.0000056084 -0.0000210234 -0.0000158208 0.0000251520 0.0000286859 0.0000549403 -0.0000156482 0.0000806173 0.0047863004 0.0008708160 0.0088304113 0.0005273290 -0.0009799953 -0.0010152958 0.0000054294 -0.0000001600 -0.0000002588 -0.0000403332 -0.0000147851 -0.0001741047 0.0002081406 -0.0004314601 -0.0005059747 -0.0000003860 -0.0000001206 0.0000006087 -0.0000002507 -0.0000001764 0.0000002004 -0.0000028525 0.0000005873 -0.0000013482 -0.0000027971 0.0000009006 -0.0000008810 0.0000342869 -0.0000076411 -0.0000213098 -0.0000242051 -0.0000103818 -0.0000142929 0.0002300381 0.0009961638 -0.0000160970 0.0003179768 -0.0003915199 -0.0002209193 -0.0026747912 -0.0115138942 0.0002068003 -0.0040938091 0.0043417488 0.0027864589 0.0000028644 -0.0000461173 -0.0000257358 -0.0001239135 -0.0000213075 0.0000709634 0.0000237608 0.0002754642 -0.0000185174 0.0014370156 0.0005346317 -0.0008260601 -0.0002086509 0.0001619996 -0.0001258891 0.0029937619 -0.0001920396 0.0015983356 0.0000045945 -0.0043800055 0.0003815695 -0.0135786202 0.0102481617 -0.0087919946 0.0057303962 0.0571331998 -0.0010871308 0.1568717735 -0.1308239314 0.1025532237 -0.0065946669 -0.0641586024 -0.0007321880 0.0305802445 0.0177273913 0.0162244009 0.0692417952 0.7432415265 0.0045860294 -0.3756650496 -0.1950383404 -0.2006758702 0.0000025352 -0.0000006817 -0.0000002468 -0.0000142338 -0.0000092368 0.0000053555 -0.0000033398 0.0000102388 -0.0000087628 -0.0000114049 0.0000115361 0.0000078048 -0.0000018886 0.0000043101 0.0000019495 0.0000038666 -0.0000093197 0.0000146449 -0.0000099333 -0.0000072644 -0.0000227085 0.0000313662 -0.0000336080 -0.0000130325 -0.0000159599 0.0000150878 0.0000149695 0.0011159698 0.0050211948 0.0001455437 -0.0000912446 -0.0004467725 -0.0000163422 -0.0000150301 -0.0000070155 -0.0000106882 -0.0000038908 0.0000104770 -0.0000112220 0.0000852914 0.0008006573 0.0000457242 0.0000368266 0.0000780113 0.0000557650 -0.0083886331 -0.0792728958 -0.0059019095 0.0035874679 0.0009950559 0.0017291821 0.0835282484 0.9039989584 0.0630717479 -0.0001872064 -0.0001501012 -0.0000238918 -0.0000073179 -0.0000132480 0.0000117486 0.0000696770 0.0000361738 -0.0000248214 -0.0000289384 0.0000075097 0.0000128985 -0.0000506398 -0.0000420224 -0.0000142911 -0.0060089178 -0.0027703843 -0.0024117471 -0.0000004970 -0.0000991520 -0.0001429533 0.0000003955 0.0000076919 0.0000095129 -0.0000180103 -0.0000078324 -0.0000019704 0.0000078843 0.0000022219 -0.0000099032 -0.0000399691 -0.0000486842 0.0000009383 0.0000570734 0.0000162344 -0.0000769303 0.0000045108 0.0000039751 -0.0000002694 -0.0000974193 -0.0000334309 0.0001202734 0.0004614504 0.0005732797 0.0000299961 -0.0006261898 -0.0002342772 0.0008323021 0.0004745806 0.0002228815 0.0001849048 -0.0003283905 -0.0002284369 -0.0001228834 0.0036628529 0.0023602592 0.0012848836 -0.0000010699 0.0000035607 0.0000164812 0.0000006532 0.0000007105 -0.0000011653 0.0000816449 0.0000692457 0.0000360842 0.0000122023 0.0000060699 -0.0000134044 0.0000111684 0.0000097555 0.0000062809 -0.0000420264 -0.0000225070 0.0000320869 -0.0009149368 -0.0007911727 -0.0004549637 -0.0001526205 -0.0000509781 0.0001673950 -0.0001232304 -0.0001088437 -0.0000703127 0.0004865788 0.0002493665 -0.0004221414 -0.0000000978 0.0000050692 0.0000324522 0.0000030843 0.0000050340 0.0000162928 -0.0000219623 -0.0000625751 -0.0002824695 -0.0000020947 -0.0003335396 -0.0001322343 -0.0000203212 0.0000249742 0.0000087724 0.0000181641 -0.0000171609 -0.0000371363 0.0000064645 0.0000203411 0.0000147402 -0.0000035529 -0.0000085587 -0.0000010897 -0.0000101380 -0.0000031365 -0.0000012878 -0.0000279917 0.0000294585 0.0000377411 -0.0000055936 -0.0000042057 -0.0000019567 -0.0000102257 -0.0000020451 0.0000048237 0.0000154202 -0.0000084038 -0.0000004411 0.0000317237 -0.0000400014 -0.0000375188 -0.0000071606 0.0000896542 -0.0000022026 0.0001098593 0.0000192361 0.0000523027 0.0004118676 -0.0003443907 -0.0002496017 0.0000034750 0.0000557647 -0.0002091876 -0.0000480716 -0.0000593230 0.0000164536 0.0000094427 0.0000789932 0.0000220416 0.0000700722 -0.0000040793 0.0000260438 0.0000003903 0.0000010713 -0.0000176872 -0.0000469183 0.0001435394 -0.0000156319 -0.0000188305 0.0000002677 -0.0000134382 -0.0000877628 -0.0000638907 0.0000036218 0.0000039119 -0.0000011493 -0.0000024835 -0.0000113696 0.0000067915 0.0000212807 -0.0000021948 -0.0000046104 -0.0000054237 -0.0000032330 -0.0000008927 0.0000010506 0.0000014326 0.0000003516 -0.0000001093 -0.0000065537 -0.0000056233 -0.0000047109 0.0001104095 -0.0000724535 -0.0002374018 0.0000418985 0.0000576597 0.0000526515 0.0000046477 0.0000006464 -0.0000050053 0.0000008034 -0.0000029368 -0.0000050041 0.0000691928 0.0000740378 0.0000580228 0.0009925343 0.0003148358 0.0019311699 0.0000132705 -0.0000992204 -0.0002097067 -0.0000160823 0.0000196305 0.0000434078 0.0000413757 -0.0000608794 -0.0000779615 -0.0001508977 0.0000565071 -0.0001841695 -0.0118738267 -0.0022115949 -0.0218807546 -0.0012828967 0.0022855019 0.0023684261 -0.0000033169 -0.0000073642 0.0000001965 0.0001344540 0.0000463760 0.0005255400 -0.0003859367 0.0008040072 0.0011256539 -0.0000020532 -0.0000000593 0.0000031382 -0.0000011280 -0.0000007265 0.0000008295 0.0000049071 0.0000005923 0.0000024972 0.0000040045 0.0000024873 0.0000057845 0.0000177882 0.0000056103 -0.0000120177 -0.0000031963 -0.0000042543 -0.0000043948 0.0000529194 0.0002172314 -0.0000048728 0.0000746824 -0.0001016781 -0.0000523677 -0.0005997637 -0.0025363560 0.0000506192 -0.0009817504 0.0010370852 0.0006719536 -0.0000272995 -0.0001431376 -0.0000154643 0.0000795637 0.0000484053 -0.0000465741 0.0003226396 0.0015867093 0.0000280227 -0.0010027837 -0.0003980298 0.0005740393 0.0001345124 0.0005880968 -0.0000005048 -0.0016738308 0.0013663380 -0.0008111151 -0.0001772944 -0.0026849465 0.0001346440 -0.0075004677 0.0058896096 -0.0048776470 0.0037226564 0.0333020489 -0.0004348200 0.0874177481 -0.0727383610 0.0570839527 -0.0029393928 -0.0258902910 -0.0004545421 0.0157039664 0.0085820368 0.0083802585 0.0309051871 0.3013225350 0.0032518735 -0.1869739032 -0.0972691208 -0.0998514535 -0.0000077603 -0.0000034423 0.0000132060 0.0000799865 0.0000580586 -0.0000302366 -0.0000336068 0.0000622491 -0.0000583031 0.0000767711 -0.0000832555 -0.0000561733 -0.0000145640 0.0000192437 0.0000249872 -0.0000223405 0.0000878361 -0.0000849451 -0.0000450370 -0.0000662491 -0.0000983040 0.0002681137 -0.0002751344 -0.0001154421 0.0033243406 -0.0022549227 -0.0018590371 -0.2139772177 -0.9573518023 -0.0271758810 0.0176256421 0.0842903385 0.0027964961 -0.0000043649 -0.0001163477 -0.0000496957 -0.0001842712 -0.0008065997 0.0000017907 -0.0000077408 -0.0000015494 0.0000132578 -0.0000029611 0.0000154105 0.0000076580 -0.0000329994 -0.0003337429 -0.0000233858 0.0000148240 0.0000003420 0.0000020829 0.0003528171 0.0038378653 0.0002659597 -0.0000106332 0.0000025162 -0.0000178031 -0.0001185516 0.0001923623 0.0000051320 0.0000611810 -0.0000121405 0.0000587343 -0.0000250643 0.0000110195 -0.0000085222 -0.0000595683 -0.0000398597 -0.0000352937 -0.0092158596 -0.0042317631 -0.0037470483 -0.0000117083 -0.0010707638 -0.0015785194 -0.0000040126 0.0000841499 0.0001317439 -0.0000263720 -0.0000062380 0.0000031861 0.0000806957 0.0000268315 -0.0000870094 -0.0000988524 -0.0001298317 -0.0000079945 0.0001047073 0.0000302464 -0.0001336521 0.0000028273 0.0000030531 0.0000016830 -0.0009063529 -0.0002890596 0.0010367205 0.0012003956 0.0015150399 0.0000816952 -0.0011520377 -0.0004159088 0.0014939161 0.0007499727 0.0003295789 0.0002774379 -0.0005340469 -0.0003293177 -0.0001857219 0.0056512323 0.0036218108 0.0020029565 -0.0000016643 0.0000007348 0.0000243009 0.0000024313 -0.0000190599 -0.0000844131 0.0001519603 0.0001281166 0.0000679505 0.0000268159 0.0000133322 -0.0000268125 0.0000127644 0.0000114882 0.0000119015 -0.0001073608 -0.0000563240 0.0000879823 -0.0017333589 -0.0014810314 -0.0008502312 -0.0003096507 -0.0001180870 0.0003116125 -0.0001564998 -0.0001332442 -0.0000914772 0.0012508100 0.0006512044 -0.0010965532 0.0000142735 0.0002558666 0.0010014885 -0.0000208181 -0.0000304300 -0.0000714118 0.0003658270 0.0004431810 0.0010621250 0.0000029756 -0.0000039661 0.0000009201 -0.0000133608 0.0000199670 0.0000045489 0.0000170807 -0.0000087191 -0.0000254128 0.0000018960 0.0000074051 0.0000090972 0.0000009827 -0.0000012821 -0.0000005619 0.0000015141 0.0000069958 0.0000013516 -0.0000222866 0.0000228846 0.0000209461 0.0000028614 0.0000028797 0.0000016193 -0.0000068975 -0.0000023162 0.0000035023 -0.0002158928 -0.0001685102 -0.0000957348 0.0000036016 0.0000025181 0.0000025431 -0.0000032225 -0.0000735798 -0.0000019801 -0.0000281483 -0.0000091584 -0.0000128196 0.0002885135 -0.0002096098 -0.0001761894 0.0000031531 0.0000321456 -0.0000798570 -0.0000274541 -0.0001009797 0.0000022848 -0.0000037751 -0.0000237500 -0.0000047537 -0.0000436872 -0.0000019454 -0.0000183931 0.0000012877 -0.0000047516 0.0000091713 -0.0001891716 0.0005796327 -0.0000942850 0.0006680503 -0.0001496848 0.0011710647 0.0020858480 0.0015614612 0.0000483190 0.0001652508 0.0004101708 0.0001489416 0.0015185137 -0.0012800489 -0.0035104858 0.0000565560 0.0001825281 0.0003317999 -0.0000201676 -0.0000182084 -0.0000464761 0.0000666590 0.0000589270 0.0000685058 -0.0001799291 -0.0000066764 0.0002064957 -0.0175038340 0.0129296328 0.0398469316 -0.0029530435 -0.0032399763 -0.0034100155 -0.0000087350 0.0000069212 -0.0000043298 0.0000522408 -0.0001035116 -0.0004444111 -0.0005692754 -0.0007761456 -0.0010437751 -0.0000011700 0.0000023494 0.0000011238 0.0000013595 -0.0000003062 0.0000009815 -0.0000034311 0.0000021501 -0.0000003761 0.0000011058 -0.0000018269 -0.0000021268 -0.0000045422 0.0000046399 0.0000012006 -0.0000076686 -0.0000091787 -0.0000187026 -0.0000003877 -0.0000001658 -0.0000008241 0.0000057554 -0.0000032945 0.0000010464 0.0000089823 0.0000038320 0.0000213545 0.0000254291 -0.0000378031 -0.0000236112 0.0000070454 -0.0000014637 -0.0000022986 0.0000074223 -0.0000032821 -0.0000046608 -0.0000018325 0.0000008799 -0.0000015404 -0.0000021574 0.0000016149 0.0000006893 -0.0026308430 -0.0005226189 0.0012497667 -0.0000071834 -0.0005560669 -0.0000139957 0.0016744702 0.0086800976 0.0000412974 0.0056732548 -0.0059244898 -0.0038670262 -0.0208990413 -0.1013806296 0.0004337464 -0.0650708260 0.0690714197 0.0443257467 0.0003928539 0.0017919099 -0.0000960621 -0.0048595779 -0.0018028247 0.0027530777 -0.0044568518 -0.0213800867 0.0007707512 0.0572680999 0.0217478358 -0.0323455462 0.0000026499 0.0000079363 0.0000032655 -0.0000087769 0.0000017943 -0.0000010508 0.0000128968 0.0001008921 0.0000113799 0.0000226974 -0.0000359085 0.0000190207 -0.0001449992 -0.0011546728 -0.0000750678 -0.0003599295 0.0003175444 -0.0002483743 -0.0000213646 -0.0002054894 -0.0000027067 0.0001462277 0.0000867760 0.0000770687 0.0002402932 0.0024158783 0.0000228269 -0.0017210392 -0.0008910218 -0.0009232372 0.0000007375 0.0000120034 0.0000051071 -0.0000705020 -0.0000349025 0.0000269672 0.0000033648 -0.0000078802 0.0000036891 0.0000860638 -0.0000771644 -0.0000632413 0.0000117765 -0.0000461919 -0.0000454188 0.0000076909 0.0000071904 -0.0000112198 0.0002004043 0.0001994798 0.0003489683 -0.0003543632 0.0003693016 0.0002015235 -0.0000096055 0.0000078066 0.0000056272 0.0006310010 0.0028286567 0.0000775884 -0.0000511256 -0.0002499461 -0.0000096364 -0.0000009234 0.0000008654 0.0000008379 0.0000117877 -0.0000072524 -0.0000027409 0.0000094619 0.0000009342 0.0000081095 -0.0000025300 -0.0000001866 -0.0000011699 0.0000138685 0.0001231519 0.0000089450 -0.0000096967 -0.0000019275 -0.0000039475 -0.0001376004 -0.0014263585 -0.0001024538 -0.0000206813 -0.0000248365 -0.0000139082 -0.0000164478 -0.0000072281 -0.0000204678 0.0000069024 0.0000929293 0.0000824972 0.0000367401 -0.0000516956 -0.0000488983 -0.0000659052 -0.0001030977 -0.0000806862 -0.0108290073 -0.0050834820 -0.0039863808 -0.0000347063 -0.0023000615 -0.0033397739 0.0000246405 0.0002108779 0.0002649103 -0.0000746223 -0.0000926274 -0.0000484060 0.0000667163 -0.0000245564 -0.0001411444 -0.0004271749 -0.0005057598 0.0000211057 0.0008124170 0.0002980544 -0.0010193596 0.0000564126 0.0000853367 0.0000176179 -0.0011957166 -0.0003624097 0.0014448943 0.0048691231 0.0060936843 0.0003456431 -0.0089349469 -0.0034882720 0.0116583585 0.0009481458 0.0003175675 0.0002095784 -0.0044612041 -0.0026298989 -0.0014404702 0.0506081292 0.0302865530 0.0154195185 -0.0011577442 -0.0002400783 0.0018522428 -0.0002890273 -0.0109824271 -0.0449162579 0.0366611850 0.0308309014 0.0160141016 -0.0020612379 -0.0013184220 0.0008135583 0.0134142825 0.0111898090 0.0076364206 -0.0305421759 -0.0156614200 0.0263772213 -0.4176077590 -0.3589290597 -0.2002664166 0.0235575059 0.0125640842 -0.0188965666 -0.1685911465 -0.1360298853 -0.0780538273 0.3631174942 0.1872685990 -0.3180654730 0.0089654962 0.1317762537 0.5254134069 0.0002553379 0.0003062961 0.0008767505 -0.0040097535 -0.0048537299 -0.0136073820 -0.0000015405 0.0000018566 -0.0000003664 -0.0000415179 0.0000329371 -0.0000381099 0.0000482060 0.0001925388 0.0001265095 0.0000070586 -0.0000177820 -0.0000636172 -0.0000012391 -0.0000224712 0.0000051887 -0.0000085496 0.0000080351 -0.0000024211 0.0000303624 0.0000534313 -0.0001755110 -0.0000228636 -0.0000429174 0.0000294830 -0.0000870080 -0.0001787242 0.0000004763 0.0122166131 0.0101091455 0.0046205088 0.0000455705 -0.0000212411 -0.0000349702 -0.0000013111 0.0000046027 -0.0000153845 0.0000424382 0.0000038091 0.0000235261 -0.0004207328 0.0001282466 0.0003261924 -0.0000062683 -0.0009279781 0.0017384489 -0.0000182336 0.0000836983 -0.0000565039 0.0001006359 0.0004703319 0.0000968791 0.0002310357 -0.0000055749 0.0001496501 -0.0000415569 0.0002407472 -0.0005735910 0.0115176870 -0.0361517039 0.0063614625 -0.0337391797 0.0082125440 -0.0584407978 -0.1221103525 -0.0910044000 -0.0028510024 -0.0000042912 -0.0000027251 0.0000061552 -0.0000153784 0.0000085642 0.0000275865 -0.0000091575 -0.0000107411 -0.0000132618 0.0000091886 -0.0000048814 0.0000093234 0.0001048635 -0.0000740558 -0.0002051977 -0.0000319498 -0.0000256710 -0.0000150644 0.0001379775 -0.0001247395 -0.0003679968 0.0001309476 0.0001100740 0.0000958538 0.0001130720 0.0000356215 0.0001566715 -0.0011127171 0.0008402432 0.0022442355 0.0001722217 0.0002741577 0.0002290850 0.0000090901 0.0000006832 0.0000164442 0.0000024536 -0.0000059108 -0.0000081382 0.0000031381 -0.0000016580 0.0000007396 0.0000001923 0.0000023535 0.0000045091 0.0000071476 -0.0000098974 -0.0000087417 -0.0000957487 -0.0000165953 -0.0001966300 -0.0000507174 0.0000641516 0.0000734065 -0.0000072388 0.0000033357 0.0000040654 -0.0000232860 -0.0000059185 -0.0000362108 -0.0000603954 0.0001135477 0.0001071708 0.0000201748 -0.0000193371 -0.0000494622 -0.0000939375 0.0000329815 -0.0000747644 0.0000018623 -0.0000003463 -0.0000004895 0.0000044013 -0.0000006987 -0.0000034317 0.0000070636 0.0000019800 -0.0000028036 0.0000010603 0.0000009837 -0.0000006409 -0.0000063081 -0.0000377856 -0.0000006747 -0.0000361504 0.0000372799 0.0000246533 0.0000919161 0.0004365437 -0.0000056206 0.0004064958 -0.0004320031 -0.0002789512 -0.0000038580 -0.0000166075 0.0000010211 0.0000190887 0.0000069041 -0.0000108162 0.0000431731 0.0001976653 -0.0000104206 -0.0002361639 -0.0000892291 0.0001323878 0.0000008185 -0.0000004890 0.0000003058 0.0000027201 -0.0000023583 0.0000016293 -0.0000008843 0.0000044742 -0.0000008970 0.0000243837 -0.0000186627 0.0000159459 -0.0000028643 -0.0000637921 0.0000046665 -0.0002746785 0.0002273177 -0.0001802084 0.0000040578 0.0000284574 0.0000011638 -0.0000367816 -0.0000185527 -0.0000195610 -0.0000363710 -0.0003428675 -0.0000046475 0.0004257560 0.0002166053 0.0002268931 0.0000920819 0.0000327921 -0.0000369650 -0.0006933022 -0.0003881835 0.0001799080 -0.0000138595 -0.0000245974 0.0000857193 -0.0002208884 0.0001808338 0.0001868414 -0.0000801477 0.0000136975 -0.0001042017 0.0000726273 -0.0005218573 0.0004974169 0.0005981884 0.0006298622 0.0012168252 0.0003103182 -0.0003946241 -0.0003262556 -0.0000128114 0.0000091342 0.0000074170 0.0007761664 0.0034837677 0.0001010416 -0.0000631627 -0.0003060240 -0.0000105692 -0.0000021534 0.0000007981 0.0000013849 0.0000103617 -0.0000065927 -0.0000049640 0.0000090613 0.0000025248 0.0000049308 -0.0000021843 -0.0000003758 -0.0000008139 0.0000020059 0.0000152541 0.0000020644 -0.0000022238 -0.0000021199 -0.0000011457 -0.0000120689 -0.0001668219 -0.0000120085 -0.0000150410 -0.0000082485 -0.0000040341 -0.0000145010 0.0000067408 -0.0000087108 0.0000156436 0.0000222181 0.0000244127 0.0000004738 -0.0000078198 -0.0000131221 -0.0000244726 -0.0000273245 -0.0000277457 -0.0027489077 -0.0013771771 -0.0009511282 -0.0000047613 0.0008928707 0.0013057109 0.0000066265 -0.0000701456 -0.0001136524 -0.0000179247 -0.0000333408 -0.0000324201 -0.0000417774 -0.0000279839 0.0000312404 0.0000280313 0.0000458757 0.0000207917 0.0001214661 0.0000399229 -0.0001512576 0.0000166209 0.0000265956 0.0000044022 0.0003952714 0.0001462255 -0.0004529906 -0.0003944736 -0.0005006220 -0.0000314789 -0.0013040424 -0.0005245816 0.0016805464 0.0002153555 0.0001170612 0.0000688164 -0.0012763648 -0.0008602987 -0.0003708419 0.0148963922 0.0091311683 0.0046817646 -0.0001935625 -0.0000004384 0.0003146166 -0.0000833964 -0.0019562685 -0.0078144314 0.0067408762 0.0058337087 0.0030249200 -0.0003905919 -0.0002596343 0.0001935836 0.0025220166 0.0020913510 0.0013879638 -0.0050601873 -0.0025670447 0.0043574411 -0.0783118878 -0.0673283604 -0.0375190911 0.0047705043 0.0025107015 -0.0038180854 -0.0313763045 -0.0253435425 -0.0145232930 0.0603530585 0.0312003235 -0.0529321847 0.0015772499 0.0229685310 0.0915053114 0.0001031659 0.0001282146 0.0003542665 -0.0015870131 -0.0019923685 -0.0054796439 0.0000018025 -0.0000010048 0.0000006165 -0.0001087894 0.0002157516 0.0001471600 0.0006121730 -0.0005987188 -0.0010677166 -0.0001390678 0.0001241553 0.0003642292 0.0000702172 0.0000817889 -0.0000159863 0.0000493920 -0.0000503921 -0.0000082746 -0.0000762786 0.0000393731 0.0000354731 0.0001292200 0.0002113596 -0.0000930819 0.0003584576 0.0003744023 0.0001588966 -0.0713996762 -0.0550748219 -0.0284898094 -0.0005242937 0.0001945758 0.0004893447 0.0000155244 0.0001633859 0.0000713907 -0.0003228824 -0.0000263213 -0.0002765746 0.0006533956 -0.0005625875 -0.0004196000 0.0000531240 -0.0000847483 0.0000128635 -0.0001168214 -0.0000882381 -0.0000741424 -0.0005501896 -0.0024832751 -0.0005287927 -0.0016736603 0.0000881662 -0.0008064981 0.0001371903 -0.0009528982 0.0023683368 -0.0592254992 0.1820952972 -0.0325258141 0.2069160624 -0.0485255277 0.3587775829 0.6931580651 0.5174882299 0.0154788311 -0.0000018742 -0.0000023226 0.0000024698 -0.0000002568 0.0000018786 0.0000005802 0.0000006258 0.0000018106 0.0000024107 0.0000058730 0.0000010846 0.0000006463 0.0000126352 -0.0000111475 -0.0000289588 -0.0000017018 -0.0000022212 -0.0000027095 0.0000091907 -0.0000151929 -0.0000247559 -0.0000134309 -0.0000263724 -0.0000246976 0.0000058598 0.0000025059 0.0000278683 -0.0001602267 0.0001179077 0.0003128339 0.0000105297 0.0000244425 0.0000271978 -0.0000078473 -0.0000001561 -0.0000112572 -0.0000023268 0.0000059289 0.0000094554 -0.0000031713 0.0000023310 -0.0000006433 -0.0000049831 -0.0000024491 -0.0000111944 -0.0000012760 0.0000008711 0.0000006488 0.0000772122 0.0000161055 0.0001418643 0.0000604475 -0.0000656263 -0.0000823636 0.0000116632 -0.0000044899 -0.0000087679 0.0000674574 0.0000137890 0.0000995821 0.0000088814 -0.0000095133 -0.0000169322 0.0000076088 -0.0000026468 -0.0000097820 -0.0000096446 0.0000073314 -0.0000111437 -0.0000028178 -0.0000005071 0.0000027096 -0.0000076224 0.0000011442 0.0000062456 0.0000089351 0.0000027648 -0.0000040135 0.0000012581 0.0000011821 -0.0000006112 -0.0000082594 -0.0000472058 -0.0000006860 -0.0000450146 0.0000473867 0.0000307430 0.0001177406 0.0005534408 -0.0000040325 0.0005137011 -0.0005433327 -0.0003493843 -0.0000008322 -0.0000011454 0.0000004899 0.0000203223 0.0000057696 -0.0000116201 0.0000083597 0.0000221132 -0.0000003507 -0.0002420875 -0.0000906894 0.0001369476 0.0000004579 0.0000007727 0.0000004474 0.0000001805 -0.0000004308 -0.0000003102 0.0000006331 0.0000049597 -0.0000000166 -0.0000045679 0.0000041189 -0.0000028869 -0.0000054474 -0.0000620016 -0.0000001052 0.0000426733 -0.0000376377 0.0000284034 0.0000021070 0.0000093694 0.0000008648 -0.0000230534 -0.0000117965 -0.0000122637 -0.0000092758 -0.0001103283 -0.0000014363 0.0002559244 0.0001329990 0.0001369074 0.0002048829 0.0001488951 -0.0001509176 -0.0024281142 -0.0016626665 0.0009003092 0.0003762271 -0.0006806164 0.0007482307 -0.0005732962 0.0005677692 0.0004757394 -0.0000465178 -0.0001516703 -0.0003197625 0.0001575004 -0.0007709522 0.0006790331 0.0015105504 0.0015025610 0.0027097111 -0.0009390343 0.0010513639 0.0004682020 -0.0000118531 0.0000106321 0.0000088941 0.0006581942 0.0030041190 0.0000817458 -0.0000521648 -0.0002615282 -0.0000093452 -0.0000071352 0.0000036127 0.0000045895 0.0000348602 -0.0000337049 -0.0000207590 0.0000221170 0.0000094065 0.0000105589 -0.0000045259 -0.0000005469 -0.0000030762 0.0000086982 0.0000724418 0.0000062006 -0.0000065566 -0.0000032392 -0.0000033140 -0.0000811036 -0.0008388704 -0.0000618026 -0.0000349939 -0.0000156926 0.0000051599 -0.0000594516 0.0000230557 -0.0000232634 0.0000731796 0.0000576323 0.0000292676 -0.0000102175 -0.0000418557 -0.0000224023 -0.0000314048 -0.0000382803 -0.0000771255 0.0250496617 0.0116501907 0.0104795940 -0.0013889026 -0.3965516530 -0.5784780335 0.0005602852 0.0343150546 0.0492864560 -0.0005684936 -0.0010044922 -0.0004860989 0.0138803062 0.0033178234 -0.0184056190 -0.0274818184 -0.0353096368 -0.0029849590 0.0183515648 0.0077608322 -0.0227215080 0.0003547409 0.0008561347 0.0006900344 -0.1785983552 -0.0599835470 0.2120280719 0.3309246426 0.4184217050 0.0266028844 -0.2124105171 -0.0801415461 0.2778465832 -0.0017094467 -0.0009399668 -0.0009160432 -0.0036597690 -0.0019751776 -0.0010637073 0.0402004340 0.0237649430 0.0134929791 -0.0000130192 -0.0000080554 0.0000935807 0.0000270497 0.0003751068 0.0014855794 0.0001194894 0.0001209029 0.0001063896 0.0000259818 0.0000279518 0.0000231529 -0.0005059114 -0.0004183541 -0.0002830694 0.0006110587 0.0002966645 -0.0006170635 -0.0013275597 -0.0012916234 -0.0008033134 -0.0001723838 -0.0001687950 0.0001164137 0.0062077288 0.0050023512 0.0028687823 -0.0074026433 -0.0038237636 0.0065331692 -0.0002941110 -0.0043468251 -0.0173091868 0.0009219591 0.0011600562 0.0029713127 -0.0140469791 -0.0174178344 -0.0462286544 0.0000006549 0.0000021920 -0.0000005382 0.0000718367 -0.0000850733 -0.0000325644 -0.0000747040 0.0000399295 0.0000883990 -0.0000094789 -0.0000348264 -0.0000242757 0.0000023077 0.0000113306 -0.0000010076 0.0000241073 -0.0000155521 -0.0000097215 0.0000349703 -0.0000347628 -0.0000326672 -0.0000005297 0.0000009736 -0.0000046863 0.0000447029 0.0000086999 -0.0000152633 -0.0001971964 -0.0001328978 -0.0000449255 -0.0002039684 0.0000837548 0.0001807171 0.0000010624 0.0000854608 0.0000140290 -0.0000925780 -0.0000148889 -0.0000484258 -0.0004503435 0.0003615128 0.0002746944 -0.0000009786 -0.0000277438 0.0001547549 0.0000275414 0.0000825274 -0.0000089677 -0.0000035684 -0.0000382125 -0.0000143521 0.0000238430 0.0000065539 0.0000101257 -0.0000066516 -0.0000218353 0.0000613454 -0.0000756366 0.0002820128 -0.0000820823 0.0004137608 -0.0000960983 0.0006774938 0.0018972821 0.0014026163 0.0000337401 -0.0000107653 -0.0000098529 0.0000014019 -0.0000718670 0.0000600928 0.0001899775 -0.0000518587 -0.0000517915 -0.0000633354 0.0000192072 0.0000121432 0.0000151123 -0.0000085060 -0.0000036163 -0.0000042822 0.0000304147 0.0000257703 0.0000170137 0.0009179489 -0.0006808054 -0.0023136731 0.0009455398 0.0005175414 0.0008886693 -0.0000785560 -0.0000401686 -0.0000970993 0.0000063154 -0.0000517380 -0.0000179476 -0.0002323653 -0.0002833787 -0.0002573261 0.0000066862 0.0000010822 0.0000142717 -0.0000019536 0.0000019082 0.0000014637 0.0000016419 -0.0000011226 -0.0000003527 -0.0000033350 0.0000024549 0.0000004226 0.0000114337 -0.0000182375 -0.0000172003 -0.0000681427 -0.0000057196 -0.0001418265 0.0000112101 -0.0000074701 -0.0000103206 -0.0000010025 0.0000001535 -0.0000054387 0.0000027313 -0.0000147818 -0.0000175144 -0.0001091952 0.0001812677 0.0001722071 0.0000073907 0.0000044964 0.0000486863 0.0000686779 0.0000619871 -0.0000670580 0.0000010914 -0.0000001427 0.0000030046 -0.0000009120 -0.0000000129 0.0000022589 0.0000060567 0.0000032859 -0.0000025147 0.0000028827 -0.0000014385 -0.0000018780 -0.0000059970 -0.0000426997 -0.0000012416 -0.0000617769 0.0000622703 0.0000420620 0.0001031687 0.0005101470 -0.0000061066 0.0006891314 -0.0007248273 -0.0004710730 -0.0000078857 -0.0000240643 0.0000033408 0.0000552291 0.0000190204 -0.0000312150 0.0000707457 0.0003046530 -0.0000195999 -0.0006513618 -0.0002456202 0.0003650580 0.0000014689 0.0000010462 0.0000008528 0.0000011948 -0.0000018317 0.0000004009 -0.0000000899 0.0000043988 -0.0000003141 0.0000054608 -0.0000030063 0.0000035641 -0.0000043334 -0.0000619223 -0.0000011658 -0.0000677772 0.0000526604 -0.0000446452 0.0000038321 0.0000198655 0.0000013743 -0.0000395730 -0.0000201467 -0.0000211262 -0.0000251033 -0.0002394279 -0.0000038988 0.0004447795 0.0002291104 0.0002369200 -0.0001214363 0.0001727067 0.0000283199 -0.0002651254 0.0000195257 0.0000416033 0.0002746182 -0.0006207838 0.0006502997 0.0015611567 -0.0012564353 -0.0010012543 -0.0003743175 0.0006690840 0.0003351389 0.0002873088 -0.0012350028 0.0013636876 -0.0012925932 -0.0010493570 -0.0020734659 0.0057799980 -0.0059129360 -0.0035110407 0.0000521281 -0.0001114809 -0.0000199686 -0.0118226273 -0.0473585208 -0.0007600577 0.0009001425 0.0042138621 0.0001320045 0.0001083290 -0.0000409475 -0.0000530328 -0.0000727046 -0.0001556233 0.0000077842 0.0000023014 -0.0000017426 -0.0000097005 -0.0000079442 -0.0000043132 -0.0000300488 0.0000677496 0.0006046609 0.0000490722 -0.0000171889 -0.0000228515 -0.0000020199 -0.0004366034 -0.0069348630 -0.0003946937 -0.0000041780 -0.0000015282 0.0000004644 -0.0000071836 0.0000111993 -0.0000046673 0.0000090479 0.0000042899 0.0000074007 -0.0000016670 -0.0000025300 -0.0000022074 -0.0000102503 -0.0000083576 -0.0000066523 -0.0021296729 -0.0010045002 -0.0008376651 -0.0000066842 0.0011668214 0.0016964664 -0.0000004897 -0.0001037483 -0.0001493397 -0.0000109130 -0.0000060930 -0.0000002803 -0.0000174868 -0.0000034529 0.0000288736 0.0000035555 0.0000104975 0.0000111278 0.0000758376 0.0000257574 -0.0000967010 0.0000020319 0.0000034489 0.0000007886 0.0002624454 0.0001008975 -0.0003313640 -0.0000932219 -0.0001211354 -0.0000193051 -0.0008179706 -0.0003067571 0.0010775903 0.0001793558 0.0000726855 0.0000578236 -0.0003839857 -0.0002275887 -0.0001242671 0.0042615510 0.0026114601 0.0014189262 -0.0000311005 -0.0000092724 0.0000472328 0.0000344305 0.0002820255 0.0010774814 0.0008444622 0.0007180874 0.0003986323 0.0000178363 0.0000123169 -0.0000059836 -0.0003907235 -0.0003258649 -0.0002239107 -0.0000482489 -0.0000471240 -0.0000584723 -0.0095123904 -0.0081836187 -0.0045923896 -0.0003030843 -0.0001435774 0.0002558221 0.0048172425 0.0038857148 0.0022382825 0.0001694886 0.0001084584 -0.0000414490 -0.0002380451 -0.0031178909 -0.0123928741 0.0000082353 0.0000071015 0.0000267071 -0.0001182495 -0.0001400110 -0.0004262311 -0.0000021445 0.0000083063 -0.0000003772 -0.0000041272 0.0000060457 0.0000009338 0.0000079145 -0.0000000820 -0.0000080867 0.0000006120 0.0000015622 0.0000024369 -0.0000003703 -0.0000002256 -0.0000003135 0.0000013155 0.0000074923 0.0000013828 0.0000006936 -0.0000019966 0.0000038657 0.0000021277 0.0000004367 0.0000013338 -0.0000025383 -0.0000037755 0.0000015926 0.0000093817 0.0000211282 -0.0000042735 0.0000054409 0.0000040226 -0.0000049156 -0.0000104493 -0.0000921195 -0.0000011499 -0.0000157915 -0.0000032225 -0.0000072885 -0.0000072319 0.0000105210 -0.0000007115 0.0000011040 0.0000326976 -0.0000488938 0.0000022430 -0.0000125826 0.0000052544 -0.0000000369 -0.0000034871 -0.0000013271 -0.0000247165 -0.0000008916 -0.0000118748 0.0000012721 0.0000021734 -0.0000025400 0.0000362061 -0.0001230255 0.0000258752 0.0000206250 0.0000109765 0.0000328158 -0.0001688556 -0.0001185878 -0.0000070344 0.0000364851 0.0000500563 0.0000029325 0.0001427346 -0.0001303484 -0.0003562348 0.0000149412 0.0000194615 0.0000320800 -0.0000118216 -0.0000050029 0.0000002309 -0.0000015245 0.0000126041 0.0000223182 -0.0000079560 0.0000105498 0.0000318632 -0.0018152728 0.0013682776 0.0041430255 -0.0003410402 -0.0003479592 -0.0003685521 0.0000118242 0.0000046433 -0.0000007234 0.0000790795 -0.0000749871 -0.0002142838 -0.0001850046 -0.0002372023 -0.0002647444 -0.0000157576 -0.0000057896 -0.0000325519 0.0000000883 -0.0000007225 0.0000002393 0.0000013469 -0.0000007001 0.0000002229 -0.0000000170 0.0000011287 0.0000022610 0.0000031447 -0.0000030272 0.0000005724 0.0002060651 0.0000439305 0.0003821785 0.0000097003 -0.0000098763 -0.0000098578 0.0000001559 0.0000003640 -0.0000010280 -0.0000048406 -0.0000035311 -0.0000220038 0.0000008442 0.0000085448 -0.0000009828 -0.0000022498 -0.0000007578 0.0000019101 -0.0000044958 -0.0000008556 -0.0000032024 0.0000000912 0.0000000774 0.0000002561 -0.0000003592 0.0000000937 0.0000000102 0.0009412803 -0.0007974953 -0.0005845510 0.0001885534 -0.0002417016 -0.0001884828 0.0101008695 0.0379721300 -0.0014568257 -0.0202815586 0.0153045439 0.0131874587 -0.0995409581 -0.4250661458 0.0080501281 0.2052790964 -0.2089863616 -0.1389856402 -0.0062968786 -0.0176294629 0.0023213886 0.0565191970 0.0205902782 -0.0320079249 0.0518197269 0.2271745300 -0.0106964651 -0.6484109679 -0.2491690393 0.3663840090 0.0000019921 -0.0000814708 -0.0001181676 -0.0001736229 -0.0000280755 -0.0000976907 0.0000222787 -0.0030907879 0.0002124100 -0.0071208365 0.0058428385 -0.0046523373 0.0037054950 0.0374555163 -0.0007769299 0.0814932609 -0.0683537054 0.0532672631 0.0004043563 0.0064266074 -0.0000730864 0.0032628906 0.0009268170 0.0017948430 -0.0066312422 -0.0715971963 -0.0004166874 -0.0349351225 -0.0171874569 -0.0187280917 0.0000099758 0.0000070573 -0.0000045023 -0.0000999498 -0.0000594961 0.0000381517 0.0000050123 -0.0000145052 0.0000111893 -0.0000147308 0.0000145040 0.0000125788 0.0000185588 -0.0000438207 -0.0000385636 0.0000092673 -0.0000020426 -0.0000089405 0.0001421799 0.0001513981 0.0002637959 -0.0003864936 0.0004108158 0.0001869000 -0.0000102716 0.0000140474 0.0000076360 0.0005997706 0.0025918934 0.0000652609 -0.0000451736 -0.0002302173 -0.0000115704 -0.0000113189 0.0000053571 0.0000070189 0.0000457010 -0.0000378549 -0.0000221815 0.0000474166 0.0000204705 0.0000270856 -0.0000085097 0.0000014778 -0.0000050852 0.0000094168 0.0000640175 0.0000056481 -0.0000120104 -0.0000039585 -0.0000066754 -0.0001015355 -0.0007718717 -0.0000674706 -0.0000772960 -0.0000411826 -0.0000016881 -0.0000695976 0.0000286531 -0.0000232279 0.0001083372 0.0000769512 0.0000490722 -0.0000071797 -0.0000447079 -0.0000212259 -0.0000765746 -0.0000931836 -0.0000846479 -0.0084338246 -0.0043699588 -0.0028171211 -0.0000182012 0.0242909165 0.0355142184 0.0000422571 -0.0020736801 -0.0031139096 -0.0001511505 -0.0002059448 -0.0001182784 -0.0009567554 -0.0003048698 0.0011771948 0.0001065851 0.0003257432 0.0002969146 0.0022017121 0.0007927702 -0.0028028108 0.0000412114 0.0000834867 0.0000089306 0.0115821516 0.0039563998 -0.0137194962 -0.0024240680 -0.0033037686 -0.0004369143 -0.0240768919 -0.0092162736 0.0315535334 0.0009030154 0.0001973491 0.0000537342 -0.0100141256 -0.0058403471 -0.0031398100 0.1138152761 0.0684496153 0.0362129747 -0.0016733413 -0.0005343940 0.0021134698 0.0016877341 0.0139641854 0.0533735493 0.0429986461 0.0365582132 0.0202789355 0.0010920792 0.0006956981 -0.0005053840 -0.0191050928 -0.0159491387 -0.0109702835 -0.0027672467 -0.0025482437 -0.0026400424 -0.4846067121 -0.4167916167 -0.2336343865 -0.0168595935 -0.0086032246 0.0141217595 0.2356757653 0.1902468995 0.1095591087 0.0124774559 0.0074495437 -0.0055042776 -0.0118244288 -0.1545083761 -0.6136211862 0.0004220446 0.0005006123 0.0014222321 -0.0065479039 -0.0078984850 -0.0221019427 -0.0000002735 0.0000047300 -0.0000000797 -0.0001212568 0.0001098185 0.0000289315 0.0002659820 0.0000675396 -0.0002277350 0.0000090863 0.0000350680 0.0000553628 -0.0000263775 -0.0000148547 -0.0000068037 -0.0000159661 -0.0000008230 0.0000005522 0.0000675539 -0.0001543637 0.0001307321 0.0000159748 0.0000097417 -0.0000111346 -0.0000608058 -0.0001522732 0.0000637843 0.0001205595 0.0008410377 -0.0002771302 0.0000860429 -0.0000645209 -0.0001204058 -0.0000115440 0.0000922625 -0.0000070289 0.0002425718 0.0000293643 0.0001399690 -0.0007414942 0.0006915773 0.0003302015 -0.0000243236 0.0011036012 -0.0018509718 0.0001585600 0.0002736205 0.0001360448 -0.0000350726 0.0000033469 0.0000050187 -0.0000214859 0.0000209275 -0.0000580189 0.0000177630 -0.0001179851 0.0002019489 0.0016610071 -0.0059226669 0.0011453085 0.0016141048 0.0003247666 0.0027007732 -0.0051190739 -0.0035380491 -0.0003116784 -0.0000012487 -0.0000091939 -0.0000079583 -0.0000675062 0.0000470889 0.0001518322 -0.0000081013 -0.0000098282 -0.0000173174 -0.0000013864 -0.0000341453 -0.0000152122 -0.0001728480 0.0001311986 0.0003707755 0.0000330754 0.0000275695 0.0000140910 0.0007338897 -0.0005866725 -0.0017972564 0.0001689404 0.0000950626 0.0000963259 0.0001535498 0.0000287360 0.0000900562 0.0017794055 -0.0013699249 -0.0038423994 -0.0001974621 -0.0003226445 -0.0002022182 0.0000004436 -0.0000025490 -0.0000037852 -0.0000062709 0.0000073980 0.0000052094 0.0000046032 -0.0000029346 0.0000005686 -0.0000059220 0.0000023284 -0.0000022303 0.0000167848 -0.0000277142 -0.0000263668 0.0000269741 0.0000165063 0.0000709321 0.0000463989 -0.0000670180 -0.0000726100 -0.0000116645 0.0000060182 -0.0000053930 0.0000070781 0.0000015985 0.0000105457 -0.0001614991 0.0003120230 0.0002869342 -0.0000161059 0.0000005264 -0.0000116829 -0.0000955700 0.0000472215 -0.0000615690 0.0000047093 -0.0000012112 0.0000041446 0.0000036581 -0.0000032387 0.0000000058 -0.0000141108 0.0000172174 0.0000108714 -0.0000000944 0.0000015916 0.0000014759 -0.0001883441 -0.0007355525 0.0000239256 0.0002934494 -0.0001964641 -0.0001883484 0.0019229757 0.0082462903 -0.0001529890 -0.0028948162 0.0029091208 0.0019551943 0.0001153160 0.0003150792 -0.0000423095 -0.0010894936 -0.0004006807 0.0006165533 -0.0009279756 -0.0040708369 0.0001879947 0.0124560636 0.0047950246 -0.0070385618 0.0000069852 0.0000050218 0.0000065696 0.0000200723 0.0000025827 0.0000101864 -0.0000079494 0.0002425463 -0.0000249606 0.0006400834 -0.0005120573 0.0004164921 -0.0002839442 -0.0030065290 0.0000777523 -0.0072888509 0.0061001667 -0.0047647820 -0.0000314922 -0.0005894849 0.0000101216 -0.0004333621 -0.0001543035 -0.0002360587 0.0005924739 0.0065097403 0.0000331683 0.0046908484 0.0023421380 0.0025120171 0.0001634044 0.0001426551 -0.0000824436 -0.0016543683 -0.0009630035 0.0005103748 0.0000228393 -0.0002701586 0.0002583428 -0.0000939523 0.0000252258 0.0001316671 -0.0000085251 0.0000799278 0.0000157364 0.0001296638 -0.0001908116 0.0002467505 -0.0003185638 -0.0000936992 -0.0002812999 0.0003933112 -0.0004153034 -0.0004483208 0.0000008529 -0.0000061501 -0.0000012800 -0.0015924011 -0.0063187362 -0.0000852235 0.0001266024 0.0005669604 0.0000129528 0.0000401740 -0.0000052891 0.0000148344 -0.0000195111 -0.0000445613 0.0000127878 -0.0000180725 0.0001693291 -0.0000008387 0.0001233518 -0.0000099256 0.0000448999 -0.0003508141 -0.0034806315 -0.0002530161 0.0000412836 0.0000853436 0.0000015493 0.0023680726 0.0394657227 0.0021414948 -0.0000085661 -0.0000081250 0.0000020504 -0.0000026910 0.0000018893 -0.0000031797 0.0000067380 0.0000030641 0.0000018404 -0.0000029500 -0.0000004614 -0.0000002113 -0.0000067004 -0.0000045909 -0.0000035999 -0.0010342424 -0.0004812127 -0.0004134841 -0.0000014571 0.0001194851 0.0001838194 0.0000005627 -0.0000108640 -0.0000164091 -0.0000031498 -0.0000015422 0.0000005451 -0.0000078376 -0.0000023706 0.0000104398 -0.0000118367 -0.0000147211 0.0000000168 0.0000058088 0.0000018201 -0.0000071002 0.0000007007 0.0000003367 -0.0000003709 0.0000962470 0.0000310546 -0.0001132393 0.0001303448 0.0001611169 0.0000124357 -0.0000595456 -0.0000230139 0.0000870166 0.0000810994 0.0000396944 0.0000331099 -0.0000265169 -0.0000220288 -0.0000126192 0.0002800966 0.0001994763 0.0001274391 0.0000205508 0.0000077408 -0.0000200395 -0.0000205663 -0.0001541058 -0.0005853563 -0.0005043837 -0.0004280220 -0.0002364779 -0.0000132943 -0.0000085605 0.0000062432 0.0002314893 0.0001927800 0.0001307268 0.0000563248 0.0000418600 0.0000081046 0.0056905639 0.0048903380 0.0027380736 0.0002004259 0.0001081898 -0.0001614533 -0.0028343567 -0.0022849959 -0.0013189971 -0.0004275147 -0.0002321932 0.0003156248 0.0001337299 0.0016965403 0.0067310044 0.0000013885 0.0000014986 0.0000048561 -0.0000166995 -0.0000263428 -0.0000794442 0.0000173846 -0.0000499109 -0.0000018739 -0.0000027171 0.0000037078 0.0000015207 0.0000009975 -0.0000039185 -0.0000053507 0.0000010325 0.0000037089 0.0000025119 0.0000001320 -0.0000015682 -0.0000006559 0.0000030088 -0.0000010445 -0.0000005636 -0.0000045002 0.0000053205 0.0000035578 -0.0000019157 -0.0000022324 0.0000012653 -0.0000016466 0.0000012719 0.0000003042 0.0000000640 -0.0000121105 0.0000013393 -0.0000201701 0.0000060253 0.0000186560 0.0000071148 0.0000204219 -0.0000051014 -0.0000221589 -0.0000106234 -0.0000104780 0.0000594636 -0.0000455495 -0.0000380871 -0.0000031698 -0.0000115001 -0.0000001280 -0.0000051807 -0.0000078618 -0.0000116224 0.0000037736 0.0000232932 0.0000023127 0.0000152548 0.0000002544 0.0000052093 -0.0000001742 0.0000116100 -0.0000237564 -0.0000296555 0.0000976009 -0.0000172516 -0.0000114945 -0.0000068001 -0.0000138122 0.0000536576 0.0000361297 0.0000056725 0.0000063150 0.0000069732 0.0000004990 0.0000155904 -0.0000152515 -0.0000405164 -0.0000001855 -0.0000007534 0.0000006721 -0.0000028393 -0.0000003868 0.0000008537 0.0000022648 0.0000003800 -0.0000015805 -0.0000017970 0.0000018734 0.0000050937 -0.0002085192 0.0001575750 0.0004816813 -0.0000173413 -0.0000062430 -0.0000112594 0.0000020767 0.0000003576 -0.0000018573 -0.0000068292 0.0000058232 0.0000206833 -0.0000214935 -0.0000372224 -0.0000363577 0.0000979862 0.0000375281 0.0002072468 0.0000081761 -0.0000089038 -0.0000148509 -0.0000113992 0.0000068570 -0.0000015056 -0.0000016423 -0.0000076499 -0.0000153731 -0.0000060032 -0.0000095785 -0.0000350533 -0.0013047187 -0.0002682011 -0.0024545074 -0.0001446173 0.0002097004 0.0002155904 0.0000092646 -0.0000071356 0.0000003765 0.0000578015 0.0000173303 0.0001376955 -0.0001400664 0.0002789730 0.0003302174 -0.0000009924 0.0000001360 0.0000012324 -0.0000003050 -0.0000011370 0.0000003938 -0.0000023572 0.0000013254 -0.0000017951 -0.0000027675 0.0000031755 0.0000025420 0.0001516121 -0.0001673872 -0.0000912932 0.0000576740 -0.0000099346 0.0000485093 0.0015572544 0.0058667545 -0.0002280889 -0.0034083107 0.0026783316 0.0022211927 -0.0153489105 -0.0654473355 0.0012591640 0.0348909952 -0.0356022899 -0.0236215865 -0.0008165348 -0.0019506280 0.0004161622 0.0086577073 0.0030596631 -0.0049035760 0.0061911190 0.0269173003 -0.0013064160 -0.0989027992 -0.0379478232 0.0559347280 0.0001751683 0.0002095047 0.0001065870 0.0012820176 0.0004821422 0.0006616409 -0.0007668966 0.0153145792 -0.0017962814 0.0469067940 -0.0377336434 0.0305337149 -0.0187687950 -0.1927065689 0.0041187575 -0.5323986646 0.4460797153 -0.3482507257 -0.0026866515 -0.0423825334 0.0005017893 -0.0241221353 -0.0075821816 -0.0131844928 0.0434364607 0.4706751298 0.0026187722 0.2597787084 0.1283441557 0.1391659941 0.0000017532 0.0000010516 -0.0000001423 -0.0000177267 -0.0000161389 0.0000097445 0.0000006279 -0.0000015490 0.0000004549 -0.0000004696 -0.0000037003 0.0000000059 -0.0000084959 0.0000161589 0.0000123152 -0.0000001433 -0.0000019004 0.0000071298 -0.0000419901 -0.0000423029 -0.0000834093 0.0001499241 -0.0001627718 -0.0000689675 0.0000210300 -0.0000275591 -0.0000180098 -0.0008342858 -0.0038797744 -0.0001232847 0.0000587931 0.0003374458 0.0000181816 0.0000278173 -0.0000146259 -0.0000178318 -0.0001479383 0.0001406985 0.0000734185 -0.0001485603 -0.0000548289 -0.0000882063 0.0000311307 0.0000006501 0.0000178686 -0.0000342270 -0.0002409265 -0.0000209310 0.0000392972 0.0000157079 0.0000182316 0.0003032347 0.0028732751 0.0002208596 0.0002520167 0.0001508622 0.0000280531 0.0002240284 -0.0000870432 0.0001035029 -0.0003215530 -0.0003487259 -0.0002789313 0.0000103330 0.0002153944 0.0001383034 0.0003508063 0.0004145280 0.0003448655 0.0432208565 0.0220024273 0.0163753768 0.0007230555 -0.2448349359 -0.3589426960 -0.0008194186 0.0209007666 0.0320595713 0.0016788883 0.0023178835 0.0008248774 0.0116614442 0.0031719738 -0.0150556973 0.0118924333 0.0125891896 -0.0026219544 -0.0348894892 -0.0134612129 0.0445072159 0.0002355053 0.0001091329 0.0000698272 -0.1433805390 -0.0484696819 0.1701362917 -0.1241268704 -0.1539253444 -0.0061658176 0.3921260290 0.1471252782 -0.5145572201 -0.0046902147 -0.0015812235 -0.0011039350 0.0362853408 0.0211439924 0.0118631194 -0.4052219244 -0.2464793853 -0.1370165325 -0.0004492760 -0.0002934516 -0.0007197462 0.0002894601 0.0014144007 0.0050621309 0.0062448838 0.0052202454 0.0026978224 0.0007902948 0.0003564627 -0.0008116821 -0.0026293529 -0.0021890271 -0.0014172775 -0.0034746353 -0.0019105750 0.0024699574 -0.0709890401 -0.0604176092 -0.0327174730 -0.0094495107 -0.0053043602 0.0079320608 0.0317991935 0.0256034249 0.0146512093 0.0368999521 0.0192081891 -0.0314530823 -0.0013820390 -0.0146447609 -0.0575602182 -0.0016093213 -0.0018809366 -0.0051158023 0.0234383326 0.0284131803 0.0800624519 -0.0000015244 -0.0000108630 0.0000029877 0.0001099442 -0.0002384308 -0.0000642361 -0.0000801538 0.0001725463 0.0003988912 -0.0001040396 -0.0002036593 -0.0002066091 0.0000432186 0.0000598227 0.0000228504 0.0000521853 -0.0000105540 -0.0000008076 -0.0002351711 0.0001646993 0.0002510172 0.0000206407 0.0000026933 0.0000077894 0.0000179150 0.0000274763 0.0000006880 -0.0004148215 -0.0000456050 -0.0001626931 -0.0001769827 0.0001736938 0.0002268517 0.0000410621 -0.0001825962 0.0000354415 -0.0006373118 -0.0000734321 -0.0003299073 0.0028880511 -0.0021175286 -0.0016898665 0.0000372529 0.0004990015 -0.0014507524 -0.0002348526 -0.0005626167 -0.0000126008 -0.0000099385 -0.0003027470 -0.0001125703 -0.0004026741 0.0000521774 -0.0001158696 0.0000262274 0.0000213609 -0.0000023873 0.0002716896 -0.0010526184 0.0000942816 0.0014426131 -0.0002852426 0.0021898222 0.0028708101 0.0021396540 -0.0000372796 0.0000070773 0.0000237807 -0.0000158470 -0.0000096467 0.0000155873 0.0000467535 -0.0001534824 -0.0001830522 -0.0002224439 -0.0000651280 -0.0000220156 0.0000051128 -0.0000078058 0.0000460782 0.0000966980 -0.0000911291 -0.0000957261 -0.0000752038 0.0001769676 -0.0000716929 -0.0002215125 0.0012843530 0.0021271503 0.0017549106 0.0002626611 0.0000988576 0.0002620930 0.0004273324 -0.0002299595 -0.0008806788 0.0008232162 0.0010028257 0.0008963190 -0.0000688853 -0.0000072251 -0.0001288620 0.0000048318 0.0000083277 0.0000231560 -0.0000180338 0.0000102946 -0.0000038023 0.0000139398 -0.0000124730 -0.0000076067 -0.0000657754 0.0001079553 0.0001044038 0.0007030606 0.0000999933 0.0014108022 0.0001002430 -0.0001587671 -0.0001755783 0.0000436550 -0.0000201640 0.0000145018 0.0000568796 0.0000127266 0.0000981995 0.0006357585 -0.0012215090 -0.0011647949 -0.0000275301 -0.0000172731 -0.0001092505 -0.0002012245 -0.0000865613 0.0000708619 -0.0000177579 0.0000034045 -0.0000139364 -0.0000164021 0.0000076012 0.0000028570 -0.0000055308 -0.0000088556 0.0000011963 -0.0000099219 0.0000110436 0.0000075090 -0.0000009350 0.0000881753 0.0000103549 0.0002573757 -0.0002817573 -0.0001768606 -0.0002096051 -0.0010354012 0.0000148959 -0.0028571858 0.0030395215 0.0019554366 -0.0000274877 -0.0000783337 0.0000100244 0.0002951321 0.0001267524 -0.0001652327 0.0002046057 0.0009748137 -0.0000412262 -0.0032817581 -0.0012945747 0.0018597969 -0.0000110526 -0.0000074297 -0.0000064261 -0.0000031947 0.0000081597 -0.0000015678 0.0000024326 0.0000743658 -0.0000059390 0.0001721043 -0.0001594521 0.0001130312 -0.0001063629 -0.0008702134 0.0000211170 -0.0019561493 0.0016750581 -0.0012831401 -0.0000198233 -0.0000384851 -0.0000100383 0.0002752436 0.0001469873 0.0001465589 0.0000693001 0.0005389696 0.0000142194 -0.0030331280 -0.0015729133 -0.0016194907 -0.0001539580 -0.0004253338 0.0000166991 0.0026904523 0.0009210350 -0.0008636896 0.0000769017 0.0004699591 -0.0005853425 -0.0018918341 0.0016520933 0.0010259883 0.0004283731 -0.0002986805 0.0003614969 -0.0009420865 0.0018465589 -0.0020978538 -0.0016073936 -0.0024452802 -0.0035689940 -0.0030263876 0.0032199486 0.0025356675 0.0000362552 -0.0000395763 -0.0000280247 -0.0013201232 -0.0062801949 -0.0002000414 0.0000920220 0.0005413348 0.0000253605 0.0000411134 -0.0000238552 -0.0000270293 -0.0002324389 0.0002265621 0.0001137975 -0.0002321118 -0.0000856107 -0.0001399445 0.0000481416 0.0000023719 0.0000279506 -0.0000432354 -0.0002781908 -0.0000239549 0.0000589509 0.0000216105 0.0000266331 0.0003849886 0.0033817266 0.0002743892 0.0004048900 0.0002464131 0.0000468516 0.0003538868 -0.0001351272 0.0001690357 -0.0005130612 -0.0005798101 -0.0004662156 0.0000037419 0.0003547839 0.0002290133 0.0005711636 0.0006802896 0.0005363433 0.0815487850 0.0425962861 0.0333687417 -0.0008390242 0.1338144405 0.1972976965 0.0007790068 -0.0113450756 -0.0179363819 -0.0001332189 -0.0003854853 0.0002810481 -0.0097444443 -0.0022616597 0.0130111174 -0.0146277797 -0.0172497291 0.0005033968 0.0183112564 0.0077607088 -0.0231749668 -0.0008200435 -0.0012988738 -0.0004525200 0.1210384447 0.0405011568 -0.1438077750 0.1606187052 0.2016799087 0.0104006730 -0.2108598165 -0.0781350884 0.2758291450 -0.0080217254 -0.0027366808 -0.0022138044 0.0592860372 0.0344214077 0.0194371570 -0.6645169089 -0.4039405183 -0.2229429673 -0.0005713052 -0.0004515183 -0.0014234893 0.0004843382 0.0011052604 0.0032153113 0.0036478798 0.0029447211 0.0012461770 0.0015934411 0.0007672000 -0.0015030915 -0.0045687651 -0.0037373879 -0.0021946646 -0.0064410105 -0.0033614826 0.0053521013 -0.0421369748 -0.0354384901 -0.0178561458 -0.0180178033 -0.0101033881 0.0150555414 0.0531332977 0.0426972692 0.0241699567 0.0707719640 0.0366162384 -0.0613403550 -0.0013328905 -0.0095890165 -0.0365952916 -0.0023149225 -0.0027781756 -0.0081127239 0.0378279856 0.0455365008 0.1263935520 -0.0000046462 -0.0000134099 0.0000082544 0.0002286616 -0.0004726704 -0.0001468274 -0.0002536112 0.0003459040 0.0007999256 -0.0001842998 -0.0003986005 -0.0003940008 0.0000759685 0.0001245051 0.0000432242 0.0000976279 -0.0000291101 -0.0000040018 -0.0003757849 0.0002554517 0.0003912221 0.0000292163 0.0000009282 0.0000032488 0.0000879370 0.0000684999 -0.0000374047 -0.0006763085 -0.0001251603 -0.0001563777 -0.0003567123 0.0003747190 0.0004341460 0.0000722943 -0.0003510376 0.0000712836 -0.0011327733 -0.0001034451 -0.0005852907 0.0046184515 -0.0033278857 -0.0026478704 0.0000717717 0.0007900532 -0.0022646995 -0.0003987094 -0.0009397015 -0.0000426880 -0.0000143996 -0.0005469288 -0.0002065161 -0.0005844243 0.0000978705 -0.0001423269 0.0000271019 0.0000287160 0.0000441365 0.0004082535 -0.0014451990 0.0000229493 0.0017972748 -0.0004617499 0.0025515791 0.0051011607 0.0037405179 -0.0000352189 -0.0000405942 -0.0000067252 -0.0000429282 -0.0007192829 0.0005130591 0.0016592782 -0.0000552459 -0.0001282853 -0.0002437439 -0.0000465281 -0.0000076915 0.0000318364 -0.0000065728 0.0000424130 0.0000875938 -0.0001058714 -0.0001361200 -0.0001287117 0.0080298988 -0.0059102349 -0.0187225606 0.0023586526 0.0017621070 0.0025699515 0.0001834728 0.0000547349 0.0001992353 0.0004722905 -0.0003800643 -0.0010778224 0.0011333548 0.0013735596 0.0011809276 -0.0001903803 -0.0000286025 -0.0003672566 -0.0000045464 0.0000417834 0.0000756570 -0.0000318424 0.0000186760 -0.0000061886 0.0000170586 -0.0000257289 -0.0000284897 -0.0001278577 0.0002112744 0.0002090701 0.0020472819 0.0003352701 0.0040914157 0.0003899025 -0.0006200334 -0.0006909982 0.0000746334 -0.0000313147 0.0000229769 0.0002014382 0.0000630452 0.0003392351 0.0012737369 -0.0023911851 -0.0023296919 -0.0000072501 -0.0000270572 -0.0000682634 -0.0001142000 0.0000634580 -0.0002457842 -0.0000301674 0.0000041280 -0.0000225423 -0.0000288915 0.0000110298 0.0000057351 -0.0000155684 -0.0000069318 0.0000061443 -0.0000127598 0.0000185410 0.0000105311 -0.0000857096 -0.0001379467 0.0000324473 0.0006551307 -0.0006843117 -0.0004459582 0.0004023902 0.0014165639 -0.0000446990 -0.0071631606 0.0075634182 0.0048899539 -0.0000614719 -0.0001866022 0.0000217346 0.0005279168 0.0002416379 -0.0002943151 0.0005018173 0.0023102062 -0.0000888178 -0.0058727463 -0.0023355062 0.0033267944 -0.0000165805 -0.0000142724 -0.0000093925 -0.0000108180 0.0000081501 -0.0000058803 0.0000002797 0.0001374829 -0.0000129790 0.0003490989 -0.0003321902 0.0002305546 -0.0001919192 -0.0016525963 0.0000286481 -0.0039871249 0.0034177328 -0.0026129018 -0.0000237115 0.0001861619 -0.0000227732 0.0006846312 0.0003495002 0.0003657486 -0.0001286304 -0.0018384145 0.0000154359 -0.0075015469 -0.0038748131 -0.0040039666 -0.0002928916 -0.0001997367 -0.0000502400 0.0013412760 -0.0000484354 -0.0004383769 0.0008740045 -0.0012503002 0.0008327624 -0.0003040410 0.0005857176 -0.0002608556 0.0005052177 -0.0001373711 0.0007607737 -0.0013915173 0.0021023978 -0.0024509489 -0.0033325556 -0.0046553438 -0.0070881629 -0.0020003082 0.0022146852 0.0025132861 -0.0001413135 -0.0000371831 -0.0001778443 0.0097788616 0.0451853187 0.0011174237 -0.0007511545 -0.0039063930 0.0000281774 0.0000842687 -0.0000148142 -0.0000298357 -0.0001466470 -0.0000596647 0.0000936514 0.0000038678 0.0000043233 -0.0000020929 -0.0000140389 -0.0000010544 -0.0000037447 -0.0000002691 -0.0000049464 0.0000000673 0.0000002125 -0.0000009458 0.0000009796 0.0000104582 0.0000802479 0.0000069389 0.0000004064 0.0000031554 0.0000092967 -0.0000039514 -0.0000085087 0.0000232092 -0.0000111780 -0.0000110767 -0.0000370372 -0.0000019513 0.0000092786 0.0000173326 0.0000072745 0.0000486533 0.0000461615 0.0006100940 0.0002147697 -0.0000889523 -0.0000205333 0.0028046687 0.0041286649 -0.0000227065 -0.0002743002 -0.0003629947 -0.0000169776 -0.0000694772 -0.0000049479 0.0001495561 0.0000933553 -0.0001227744 -0.0003059178 -0.0003811466 -0.0000057828 0.0005260323 0.0002199649 -0.0005716083 0.0000415180 0.0000196641 0.0000091652 -0.0014384667 -0.0004935747 0.0016544859 0.0034638518 0.0042987270 0.0002255031 -0.0055806662 -0.0021866159 0.0072621335 -0.0000825738 -0.0000075488 0.0000232453 0.0013575375 0.0007784350 0.0004199948 -0.0151812159 -0.0091631868 -0.0050827949 -0.0000138481 -0.0000094641 -0.0000370484 0.0000399195 0.0000798378 0.0002271944 0.0000340853 0.0000158920 -0.0000148477 0.0001255493 0.0000680837 -0.0000960385 -0.0003510698 -0.0002887772 -0.0001675973 -0.0004532906 -0.0002332186 0.0003906921 -0.0004081641 -0.0002662034 -0.0001193423 -0.0014517370 -0.0007354989 0.0011757497 0.0040845656 0.0033216225 0.0018698708 0.0050118050 0.0026078487 -0.0043761146 -0.0000980668 -0.0006664124 -0.0025571083 -0.0000189658 -0.0000061275 0.0000009441 0.0000863426 -0.0005753123 -0.0000408832 0.0000016616 -0.0000010212 0.0000003078 -0.0000044730 0.0000007227 0.0000008764 0.0000052086 0.0000011146 0.0000001727 -0.0000016147 -0.0000019466 -0.0000000080 0.0000004771 0.0000017756 -0.0000015661 0.0000085440 0.0000007679 -0.0000017792 -0.0000039439 0.0000056130 0.0000056620 0.0000003491 0.0000020432 -0.0000011827 -0.0000055538 -0.0000007281 0.0000032537 -0.0000044323 0.0000114635 -0.0000107453 -0.0000625994 0.0000312286 0.0000563519 -0.0000047227 -0.0000367307 0.0000009038 -0.0000406825 -0.0000101248 -0.0000200462 0.0000642003 -0.0000372951 -0.0000470072 -0.0000001534 0.0000272492 -0.0000137272 -0.0000161860 -0.0000630168 0.0000024653 -0.0000043836 -0.0000208031 -0.0000064644 0.0000009095 0.0000002236 -0.0000000206 -0.0000046707 -0.0000115055 0.0000273947 0.0000269691 -0.0001070526 0.0000218662 0.0000525608 -0.0000042887 0.0000969625 -0.0000312041 -0.0000180977 -0.0000038982 0.0023804240 0.0021911551 0.0018634119 0.0318299700 -0.0247181340 -0.0764490056 0.0037193017 0.0067070587 0.0094170960 0.0002170506 0.0001378420 0.0000505815 0.0005309906 -0.0006687399 -0.0016495260 -0.0003094923 0.0000670292 0.0003892492 -0.3668431028 0.2764076935 0.8684956049 -0.0823615419 -0.0873858314 -0.0971505453 -0.0000210865 0.0000607836 0.0001668491 -0.0087124948 0.0068404719 0.0189953429 0.0005743813 -0.0002570161 -0.0006379061 0.0000045056 0.0000017404 0.0000111311 -0.0000004616 0.0000008821 0.0000012974 -0.0000010216 0.0000003606 -0.0000007223 0.0000031107 0.0000007681 0.0000057732 0.0000011611 -0.0000033880 -0.0000047930 -0.0000607773 -0.0000112144 -0.0001289270 0.0000039837 -0.0000053720 -0.0000072437 0.0000027235 -0.0000016489 -0.0000015998 -0.0000314464 -0.0000122225 -0.0000668389 -0.0000220453 0.0000337039 0.0000487949 0.0000222666 -0.0000110511 -0.0000412356 0.0000713468 -0.0000288200 -0.0001140031 -0.0000005434 0.0000005209 0.0000002570 -0.0000015415 0.0000009645 0.0000012755 0.0000663280 0.0000442195 -0.0000166440 -0.0000271944 0.0000591861 0.0000159341 0.0000162397 -0.0000935065 -0.0000139250 -0.0001357639 0.0001232124 0.0000890821 0.0000870458 0.0009912274 0.0000749930 0.0013584007 -0.0014711206 -0.0009334839 0.0000591871 0.0001367816 -0.0000270290 -0.0002202204 -0.0000712529 0.0001272286 -0.0003874234 -0.0016827726 0.0000693104 0.0024396428 0.0009636785 -0.0013771302 -0.0000013485 -0.0000009351 0.0000011399 -0.0000029767 0.0000001448 -0.0000021633 -0.0000013439 0.0000097247 -0.0000006724 0.0000615630 -0.0000577935 0.0000409332 -0.0000230553 -0.0001388065 -0.0000205538 -0.0007055373 0.0006029532 -0.0004627299 -0.0000012406 0.0000452668 -0.0000028345 0.0001030220 0.0000532524 0.0000550054 -0.0000375191 -0.0004648367 -0.0000014976 -0.0011308977 -0.0005821081 -0.0006051731 0.0000147527 -0.0000180020 -0.0000131081 -0.0000351090 -0.0000519027 0.0000157013 0.0000106111 0.0000062139 0.0000086988 -0.0001775852 0.0001627622 0.0001195554 -0.0000052128 0.0000176489 0.0000255377 -0.0000226090 -0.0000219337 0.0000135849 -0.0000980523 -0.0000958933 -0.0001793355 0.0001823370 -0.0001807549 -0.0000949927 0.0000071466 -0.0000050847 -0.0000090707 0.0000087772 -0.0001043369 -0.0000224144 0.0000008490 0.0000036126 0.0000003227 0.0000077645 -0.0000084194 -0.0000049114 -0.0000393878 0.0000401221 0.0000253033 -0.0000367762 -0.0000151050 -0.0000180922 0.0000077164 0.0000012530 0.0000031780 0.0000001606 0.0000052641 -0.0000009129 0.0000043034 0.0000024145 0.0000035659 0.0000074105 -0.0000511324 0.0000062357 0.0000548790 0.0000146623 -0.0000110784 0.0000559791 -0.0000427685 0.0000027970 -0.0001044518 0.0000153664 0.0000303613 0.0000288245 -0.0000138557 -0.0000216803 0.0000046670 -0.0000068094 0.0000168247 -0.0010848768 -0.0000666409 -0.0005450402 -0.0001309898 0.0061104169 0.0091850874 0.0001155634 -0.0004709873 -0.0008825837 0.0000574309 0.0000661426 0.0000546588 -0.0012122281 -0.0003417343 0.0015298969 -0.0016547366 -0.0020685956 -0.0001135246 0.0001952980 0.0001708822 -0.0001759014 -0.0000582856 -0.0001341814 -0.0000842302 0.0144295459 0.0048787446 -0.0170821848 0.0184885352 0.0233473172 0.0013601377 -0.0026047100 -0.0009435954 0.0032099229 -0.0001467991 0.0000394541 0.0000234858 0.0069617965 0.0039639098 0.0022603318 -0.0770098685 -0.0467829874 -0.0263928323 -0.0011713460 -0.0004788246 0.0008196189 -0.0041140375 -0.0014072283 0.0057846419 0.0197877155 0.0174918158 0.0118177644 -0.0045396952 -0.0030821941 0.0009928452 0.0462042520 0.0371576022 0.0207106472 0.0373423056 0.0186168244 -0.0345447231 -0.2225990990 -0.1921062769 -0.1096883066 0.0516725543 0.0275047673 -0.0399550346 -0.5215967703 -0.4197317623 -0.2371677863 -0.4249955744 -0.2187033832 0.3748566903 0.0036690692 -0.0112528537 -0.0564982775 -0.0002004673 -0.0002379242 -0.0006846899 0.0032732260 0.0039166412 0.0107194301 0.0000025796 -0.0000093362 -0.0000066994 -0.0000363162 -0.0000037928 -0.0000207366 0.0001104407 0.0001071101 0.0000435181 -0.0000438944 -0.0000815478 -0.0000571814 0.0000479994 0.0000291880 0.0000252873 0.0000074682 -0.0000036386 -0.0000040544 -0.0000294202 0.0002348742 -0.0004225748 0.0000337415 0.0000067288 0.0000386573 -0.0000565587 -0.0000602713 0.0000459122 0.0003469360 0.0004908049 0.0000553606 -0.0000527935 0.0000536485 0.0000913498 0.0000224739 -0.0000737359 0.0000300765 -0.0002965394 -0.0000185185 -0.0002148387 0.0002278329 -0.0003981259 -0.0000062247 -0.0001320618 -0.0025365315 0.0049342267 -0.0002534102 -0.0003870593 -0.0002627353 -0.0000370086 -0.0003390260 -0.0000797080 -0.0007296125 0.0000789517 -0.0002776877 0.0001266251 0.0001447140 -0.0002046971 0.0007904352 -0.0026586817 0.0006050563 -0.0004543096 0.0005710624 -0.0013889071 -0.0044701332 -0.0032064619 -0.0002719567 0.0000035111 0.0000214600 0.0000330251 0.0001927555 -0.0001648792 -0.0004928853 0.0000129119 0.0000232103 0.0000230494 -0.0000104035 -0.0000079294 0.0000211310 0.0000477810 -0.0000258347 -0.0000695065 -0.0002203345 -0.0002471705 -0.0002469065 -0.0023613574 0.0017578884 0.0055559111 -0.0003123893 -0.0004169267 -0.0004656427 0.0001419747 0.0000178510 -0.0000544097 -0.0002570867 0.0005304788 0.0008612943 0.0023127426 0.0029536564 0.0028862464 0.0001231478 0.0000259810 0.0002488124 0.0000213526 -0.0000465601 -0.0000607221 0.0000007608 0.0000007945 0.0000015402 0.0000082959 0.0000006209 0.0000116131 -0.0000135160 0.0000226235 0.0000213396 -0.0014299653 -0.0002757429 -0.0028609527 -0.0003642507 0.0005815230 0.0006574917 0.0000044881 -0.0000007605 0.0000167664 -0.0000587633 -0.0000111059 -0.0001043590 0.0001335534 -0.0002476466 -0.0002382838 -0.0000556146 0.0000164435 0.0000536634 -0.0000552840 0.0000274163 0.0000000308 -0.0000048540 -0.0000000567 -0.0000082769 0.0000025237 0.0000009685 -0.0000067619 -0.0000304704 0.0000263664 0.0000209163 0.0000161442 0.0000140812 -0.0000078493 -0.0003050337 -0.0008486714 0.0000769078 0.0014174236 -0.0014441204 -0.0009582680 0.0022394456 0.0092033273 -0.0002188720 -0.0154589012 0.0162367541 0.0105186139 -0.0002157585 -0.0007772532 0.0000662341 0.0009562964 0.0004799610 -0.0005296457 0.0020941893 0.0093368799 -0.0004214790 -0.0108473675 -0.0043326855 0.0061189467 0.0000021830 -0.0000092715 -0.0000027875 -0.0000153988 -0.0000042341 -0.0000082760 0.0000010330 0.0002123460 -0.0000214593 0.0003618113 -0.0003503116 0.0002394659 -0.0002567687 -0.0025875706 0.0000711562 -0.0041730063 0.0035714069 -0.0027353806 -0.0000076556 0.0003978502 -0.0000230778 0.0007456399 0.0003697785 0.0003987341 -0.0003541872 -0.0041951740 -0.0000035704 -0.0081704845 -0.0042127663 -0.0043662575 0.0000099505 -0.0000216351 -0.0000223399 -0.0001417205 -0.0002464384 0.0000280879 0.0001085364 -0.0001352455 0.0001011230 -0.0002278068 0.0002102508 0.0000941830 -0.0000275856 -0.0002058600 -0.0002622886 -0.0000216631 -0.0004088278 0.0004023571 0.0015467930 0.0013484124 0.0025422372 -0.0011716138 0.0011719042 0.0007187842 0.0000467879 0.0000794510 -0.0000103380 0.0033238267 0.0121460726 0.0000345736 -0.0001851843 -0.0011649729 -0.0000672079 -0.0000875810 -0.0000965401 0.0000040077 -0.0000208020 0.0000426118 0.0000104739 -0.0000126421 0.0000298268 -0.0000124858 0.0000506448 -0.0000584642 -0.0000215963 -0.0000815756 -0.0005573988 -0.0000537758 -0.0000187339 0.0000427990 -0.0000029498 0.0001953165 0.0059091885 0.0002342561 0.0000100622 0.0000000335 0.0000030134 0.0000151188 -0.0000132315 0.0000005328 -0.0000124045 -0.0000015296 -0.0000081800 0.0000052557 -0.0000011524 0.0000013670 0.0000140454 0.0000098933 0.0000074062 0.0029774136 0.0013135504 0.0011602217 0.0000159324 -0.0007759475 -0.0011512877 -0.0000071707 0.0000683989 0.0001109425 0.0000031410 -0.0000080701 -0.0000103584 0.0000325809 0.0000034116 -0.0000519815 0.0001817273 0.0002294392 0.0000143324 0.0000181774 -0.0000014489 -0.0000303418 0.0000012342 0.0000062161 0.0000050890 -0.0004524987 -0.0001580613 0.0005507858 -0.0020254520 -0.0025596789 -0.0001481859 -0.0001782673 -0.0000732078 0.0002398414 -0.0002108678 -0.0001082902 -0.0000894762 -0.0006472942 -0.0003597921 -0.0002063718 0.0073075315 0.0043642447 0.0024235212 0.0000278238 0.0000122951 -0.0000065199 0.0000850424 0.0000256921 -0.0001321577 -0.0004407543 -0.0003876392 -0.0002571067 0.0000959324 0.0000660824 -0.0000171496 -0.0009486419 -0.0007627980 -0.0004241285 -0.0007603033 -0.0003783887 0.0007057564 0.0049590310 0.0042731835 0.0024236553 -0.0010688872 -0.0005804019 0.0008130684 0.0106954921 0.0086136310 0.0048642373 0.0086632652 0.0044584912 -0.0076491163 -0.0000733041 0.0002690420 0.0013131126 0.0000174871 0.0000222398 0.0000588973 -0.0002884029 -0.0003438044 -0.0008926457 0.0000110490 -0.0000299141 -0.0000154729 0.0000064159 -0.0000050281 -0.0000010272 -0.0000084338 -0.0000025434 0.0000023322 0.0000018453 0.0000020293 0.0000016514 -0.0000022091 -0.0000006154 -0.0000010606 -0.0000019306 -0.0000052616 -0.0000005981 0.0000084446 -0.0000093863 0.0000006336 -0.0000031234 -0.0000004388 -0.0000038632 0.0000053440 0.0000021236 -0.0000020455 -0.0000159229 -0.0000121604 -0.0000030504 -0.0000010475 -0.0000025951 -0.0000037072 0.0000033463 0.0000620293 -0.0000006151 0.0000358115 0.0000076576 0.0000193572 -0.0000905287 0.0000708962 0.0000522701 0.0000003444 0.0000333730 -0.0000489021 0.0000051155 0.0000179806 0.0000057043 0.0000005431 0.0000191687 0.0000047984 0.0000560756 -0.0000000066 0.0000227752 -0.0000052793 -0.0000141869 0.0000249911 -0.0000107928 0.0000301431 -0.0000115325 0.0000271033 -0.0000164297 0.0000561668 0.0001617049 0.0001187186 0.0000079276 -0.0000151192 -0.0000213456 0.0000086469 0.0001082471 -0.0000691607 -0.0002415973 0.0000089007 0.0000241624 0.0000349350 0.0000103372 0.0000042676 -0.0000012508 0.0000001178 -0.0000082610 -0.0000161472 0.0000108472 0.0000013868 -0.0000079305 -0.0011401005 0.0008373443 0.0027065448 -0.0002647340 -0.0002855554 -0.0003256645 -0.0000147203 -0.0000046985 0.0000013040 -0.0000641227 0.0000502318 0.0001531863 0.0000312740 0.0000329361 0.0000546625 0.0002326244 0.0000503964 0.0004680161 0.0000173745 -0.0000489820 -0.0000724598 0.0000018701 -0.0000012094 0.0000006894 0.0000039390 0.0000018393 0.0000091716 0.0000000260 -0.0000064178 -0.0000128462 -0.0026814553 -0.0005070242 -0.0053262589 -0.0004184768 0.0007054803 0.0007815428 -0.0000027860 0.0000003366 -0.0000042897 -0.0000627197 -0.0000146987 -0.0001168016 -0.0000641208 0.0001167898 0.0001194981 0.0000041171 0.0000007245 -0.0000025676 0.0000067093 0.0000011055 0.0000022993 0.0000012380 -0.0000003712 0.0000022709 0.0000013429 -0.0000002267 0.0000018416 -0.0008676822 0.0008758806 0.0005898902 0.0005118619 0.0002708255 -0.0003604168 -0.0088016947 -0.0249903019 0.0021701190 0.0397436949 -0.0403908786 -0.0268457539 0.0658395642 0.2714248183 -0.0063950491 -0.4332504017 0.4549265007 0.2947787176 -0.0062002245 -0.0225447341 0.0018040004 0.0260370147 0.0132459789 -0.0144137022 0.0606826444 0.2699864271 -0.0119855320 -0.2959807610 -0.1182816222 0.1668906505 -0.0001196499 0.0001381264 -0.0002331526 0.0006320034 0.0003173329 0.0003378333 -0.0004213018 -0.0107722300 0.0005982016 -0.0122405837 0.0123091203 -0.0081779340 0.0128748005 0.1277330014 -0.0022812652 0.1441062679 -0.1237166270 0.0945176072 0.0001588266 -0.0151208465 0.0008082189 -0.0272130595 -0.0134968456 -0.0145417904 0.0134882435 0.1592799390 0.0002192042 0.2986702364 0.1536779593 0.1596622484 0.0000030083 0.0000001898 -0.0000038900 0.0000048379 0.0000145464 -0.0000066154 0.0000015772 -0.0000105555 0.0000156599 -0.0000376333 0.0000338978 0.0000315077 -0.0000038727 0.0000132610 0.0000041694 0.0000140022 -0.0000313540 0.0000316084 -0.0000381588 -0.0000231908 -0.0000519314 0.0000758489 -0.0000798592 -0.0000565835 -0.0000210142 -0.0000451514 0.0000074055 -0.0020168928 -0.0075383810 -0.0000541096 0.0001121977 0.0007011655 0.0000403965 -0.0000166518 0.0000611561 -0.0000410090 0.0000635767 -0.0000304157 -0.0000366318 0.0000737292 0.0000293155 0.0000389976 0.0000007345 -0.0000901322 0.0000338654 -0.0001742595 -0.0011708035 -0.0001126744 -0.0000241546 0.0000842483 -0.0000131884 0.0005425803 0.0128576423 0.0005809645 -0.0000671298 -0.0000226082 -0.0000114089 -0.0000462193 0.0000236527 0.0000040212 0.0000509643 0.0000136906 0.0000143344 -0.0000229311 0.0000032461 0.0000025963 -0.0000447304 -0.0000337507 -0.0000221171 -0.0075292210 -0.0033379624 -0.0029447921 -0.0000362414 0.0013189768 0.0019869516 0.0000302695 -0.0001017228 -0.0002000631 -0.0000050169 0.0000178629 0.0000190464 -0.0002488398 -0.0000720651 0.0003121406 -0.0004746629 -0.0006022160 -0.0000439491 -0.0001068292 -0.0000192882 0.0001574647 0.0000020235 -0.0000152277 -0.0000212931 0.0029578341 0.0010102596 -0.0034962887 0.0053112010 0.0067112951 0.0003985777 0.0011365955 0.0004346667 -0.0015192730 0.0005310354 0.0002786749 0.0002348242 0.0014454321 0.0007876462 0.0004506111 -0.0162390344 -0.0096707633 -0.0053734760 -0.0000360006 -0.0000160363 -0.0000080647 -0.0000985324 0.0000004418 0.0002791914 0.0005007173 0.0004381197 0.0002837286 -0.0001079295 -0.0000789072 0.0000028950 0.0012304529 0.0009874922 0.0005448571 0.0007694457 0.0003801958 -0.0007244344 -0.0056346012 -0.0048469728 -0.0027326992 0.0011843029 0.0006659321 -0.0008624928 -0.0138155797 -0.0111299703 -0.0062926598 -0.0088356249 -0.0045462068 0.0078157006 0.0000594724 -0.0006526683 -0.0028697349 -0.0000220303 -0.0000248515 -0.0000628125 0.0003620809 0.0003907315 0.0009454765 0.0000302495 -0.0000490016 0.0000009403 -0.0000214758 0.0000209803 0.0000063263 0.0000262918 -0.0000040929 -0.0000219946 -0.0000015667 0.0000059318 0.0000043837 0.0000049221 -0.0000028934 -0.0000002637 0.0000051836 0.0000009967 -0.0000023365 -0.0000249965 0.0000307942 0.0000061223 0.0000005807 0.0000035362 0.0000020338 -0.0000177736 -0.0000039257 0.0000075415 0.0000299608 0.0000141707 -0.0000016482 -0.0000439412 0.0000264954 0.0000622520 0.0000193130 0.0000002975 0.0000000988 -0.0000585645 -0.0000207400 -0.0000256083 0.0002951853 -0.0002165013 -0.0001709815 -0.0000042534 -0.0000702973 0.0001071256 -0.0000217135 -0.0000959925 -0.0000172590 0.0000033198 -0.0000134715 -0.0000030251 -0.0000537647 -0.0000012809 -0.0000180731 0.0000060655 -0.0000163144 0.0000145329 -0.0000070578 0.0000229855 0.0000115365 -0.0000177230 0.0000141313 -0.0000375391 -0.0002785123 -0.0002066879 -0.0000087603 0.0000273226 0.0000179320 -0.0000077601 -0.0000061322 -0.0000133161 -0.0000142169 -0.0000034981 -0.0000104229 -0.0000145838 -0.0000161498 -0.0000051912 0.0000043166 0.0000051125 0.0000062000 0.0000090626 -0.0000258532 -0.0000147308 -0.0000031750 -0.0000627902 0.0000875218 0.0002002127 0.0000806965 0.0000993635 0.0001060280 0.0000274367 0.0000075850 -0.0000058735 0.0000289959 -0.0000243013 -0.0000899765 0.0001372373 0.0001453454 0.0000915486 0.0001040010 0.0000411070 0.0002334476 0.0000101950 -0.0000132271 -0.0000148900 -0.0000183025 0.0000108543 -0.0000041713 0.0000092787 -0.0000072056 -0.0000014178 -0.0000204103 0.0000122016 -0.0000107725 -0.0013455990 -0.0003000846 -0.0027068352 -0.0001383309 0.0002069801 0.0002303093 0.0000255154 -0.0000160819 0.0000047194 -0.0000279234 0.0000030402 -0.0000165685 0.0000202602 -0.0000085565 0.0000593919 -0.0000081429 -0.0000016015 0.0000064093 -0.0000114440 -0.0000024639 -0.0000029929 -0.0000083373 0.0000039061 -0.0000063838 -0.0000087818 0.0000073898 0.0000043672 0.0004618962 -0.0004155608 -0.0003163671 -0.0003103212 -0.0001794888 0.0000865691 0.0047711947 0.0134107877 -0.0011849163 -0.0214842716 0.0218619053 0.0145199897 -0.0353806873 -0.1458209211 0.0034392737 0.2341782060 -0.2460267304 -0.1593467019 0.0031286964 0.0107982930 -0.0010855835 -0.0151333603 -0.0074268576 0.0083847588 -0.0296953240 -0.1315084085 0.0060995247 0.1710884081 0.0681456816 -0.0964968302 -0.0002834772 0.0003767823 -0.0001466408 0.0011090535 0.0004664455 0.0006103788 -0.0003419955 -0.0170798022 0.0013271627 -0.0241919790 0.0237107587 -0.0160778639 0.0204923013 0.2057470280 -0.0041023717 0.2816550908 -0.2413244266 0.1847002141 0.0003798734 -0.0275712013 0.0015123057 -0.0499776456 -0.0248241773 -0.0267133350 0.0245780772 0.2904266723 0.0003876954 0.5483565402 0.2823483565 0.2931245762 -0.0000052247 -0.0000141463 0.0000106144 0.0000691065 0.0000134168 -0.0000207168 -0.0000219053 0.0000727843 -0.0000737685 0.0000097455 -0.0000155856 -0.0000219419 0.0000004628 -0.0000099078 0.0000071123 -0.0000282564 0.0000642561 -0.0000582879 0.0000195059 -0.0000093738 -0.0000032459 -0.0000011938 -0.0000059807 0.0000387740 -0.0000001263 -0.0000005532 0.0000006939 0.0000329860 0.0001454755 0.0000030996 -0.0000024102 -0.0000110239 0.0000001501 0.0000110871 -0.0000049048 -0.0000041583 -0.0000020763 0.0000049034 -0.0000010329 0.0001139598 -0.0001265180 0.0000790420 -0.0000864692 0.0000100098 -0.0000302933 -0.0002795633 -0.0023298016 -0.0000251537 0.0000596272 -0.0000499015 -0.0001914431 0.0030392006 0.0271198470 0.0015759528 0.0000100909 -0.0000064299 0.0000227585 0.0000032740 0.0000007208 0.0000101632 0.0000028718 -0.0000118275 -0.0000344464 0.0000123344 0.0000267529 0.0000435689 0.0000077244 0.0000144628 0.0000190049 0.0018675137 0.0008326055 0.0007046217 0.0000079960 -0.0003371454 -0.0005108250 -0.0000077320 0.0000255702 0.0000507733 -0.0000002414 -0.0000038031 -0.0000021268 0.0000745808 0.0000207833 -0.0000944122 0.0001144550 0.0001448079 0.0000099976 0.0000239827 0.0000041186 -0.0000349830 0.0000057036 0.0000119098 0.0000059977 -0.0008870157 -0.0002959596 0.0010490475 -0.0012848801 -0.0016213953 -0.0000968345 -0.0002534382 -0.0000951029 0.0003352037 -0.0001286806 -0.0000714146 -0.0000591439 -0.0003391345 -0.0001747651 -0.0001072949 0.0037544516 0.0022235367 0.0012462551 -0.0000005656 -0.0000001315 0.0000114963 -0.0000164962 -0.0000340481 -0.0000931999 0.0000677246 0.0000612792 0.0000470748 -0.0000535640 -0.0000282681 0.0000447434 0.0001229375 0.0000996449 0.0000574635 0.0002111283 0.0001073797 -0.0001862339 -0.0007417529 -0.0006449872 -0.0003855490 0.0006143759 0.0003108659 -0.0005578415 -0.0014785765 -0.0011851856 -0.0006582068 -0.0023426168 -0.0012048247 0.0020548049 0.0000342347 0.0002774762 0.0010613012 0.0000009994 -0.0000017840 0.0000127524 -0.0000664204 -0.0000285204 -0.0002061548 -0.0017007005 0.0025033227 0.0020727811 0.0000099280 -0.0000101154 -0.0000042986 -0.0000022152 0.0000134222 0.0000166609 -0.0000059398 -0.0000153451 -0.0000057372 0.0000080987 0.0000079632 -0.0000051729 0.0000309135 -0.0000065109 -0.0000040665 0.0000221357 -0.0000723359 -0.0000674023 0.0000014780 0.0000076285 0.0000009830 0.0000003917 -0.0000016101 -0.0000005682 0.0000179430 0.0000210914 0.0000046227 -0.0002014751 0.0001569587 0.0002250095 0.0000955300 -0.0000234486 -0.0000039026 -0.0002677708 -0.0000876718 -0.0001096682 -0.0005448503 0.0005142729 0.0002094821 -0.0001373453 -0.0003378016 0.0008014849 0.0003775253 0.0006945368 -0.0002658605 -0.0000116425 -0.0000714778 -0.0000363034 -0.0000346598 0.0000053209 -0.0000129445 -0.0000144894 -0.0000435622 0.0000799324 0.0000383316 -0.0001077077 0.0000209043 -0.0000421737 0.0000202063 -0.0000787795 -0.0001999497 -0.0001499408 -0.0000069563 -0.0000013502 0.0000003194 0.0000011978 0.0000091455 -0.0000064519 -0.0000199624 0.0000073324 0.0000088743 0.0000100539 0.0000011088 0.0000000979 -0.0000003764 -0.0000023905 0.0000018524 0.0000050894 -0.0000015429 -0.0000025363 -0.0000035589 -0.0001010130 0.0000742665 0.0002269115 -0.0000928818 -0.0001005056 -0.0001046941 -0.0000030411 -0.0000009894 -0.0000025932 0.0000236991 -0.0000208965 -0.0000598724 0.0000226343 0.0000217185 0.0000328659 -0.0376918994 -0.0078449046 -0.0762533541 -0.0037507404 0.0098643937 0.0138724904 -0.0003182785 0.0001754381 -0.0001508428 -0.0006247329 -0.0003638068 -0.0016776300 0.0002717559 -0.0000285013 0.0003679374 0.4330137385 0.0816059397 0.8662551625 0.0788877608 -0.1342900846 -0.1491600346 0.0000127405 0.0001038534 0.0002474373 0.0100190784 0.0023262762 0.0189137707 -0.0004972922 -0.0003359273 -0.0008880702 0.0000004298 0.0000003720 0.0000010498 0.0000022393 0.0000002870 0.0000015084 -0.0000133990 -0.0000139815 -0.0000419832 -0.0000943632 -0.0000156304 -0.0001625024 -0.0000025896 0.0000049530 0.0000014549 0.0000038812 0.0000000857 -0.0000016345 -0.0000404563 -0.0001153056 0.0000098590 0.0001729384 -0.0001741114 -0.0001165786 0.0003038909 0.0012594525 -0.0000304598 -0.0018812094 0.0019750000 0.0012785084 -0.0000344073 -0.0001270062 0.0000100091 0.0001091293 0.0000570530 -0.0000601808 0.0003448505 0.0014962060 -0.0000853474 -0.0012490569 -0.0005003657 0.0007033399 0.0000420833 0.0000421969 0.0000161857 0.0000093289 0.0000362389 0.0000192909 -0.0000136737 -0.0000175889 -0.0000106963 -0.0000739209 0.0001093432 -0.0000506499 0.0000343647 0.0003010364 -0.0000033729 0.0010077740 -0.0008651859 0.0006593810 -0.0000382698 -0.0003020747 -0.0000016454 -0.0003070134 -0.0001687291 -0.0001642721 0.0003778786 0.0032299529 0.0000646307 0.0034399874 0.0017468989 0.0018335732 0.0000047877 0.0000064488 -0.0000056376 -0.0000712175 -0.0000437339 0.0000211107 0.0000193441 -0.0000305743 0.0000367833 -0.0000112825 0.0000199737 0.0000141250 -0.0000008276 0.0000210648 0.0000001606 0.0000516107 -0.0001441847 0.0001728249 -0.0000797987 -0.0000539146 -0.0001415839 0.0000376936 -0.0000384954 -0.0000419084 -0.0000070872 0.0000070679 0.0000051600 0.0001509646 0.0007366976 0.0000419533 -0.0000087119 -0.0000648809 -0.0000049854 -0.0000070684 0.0000040503 0.0000050088 0.0000407084 -0.0000407968 -0.0000191099 0.0000482029 0.0000176592 0.0000291050 -0.0000100317 0.0000017046 -0.0000065639 0.0000080005 0.0000440237 0.0000046275 -0.0000111703 -0.0000051961 -0.0000057784 -0.0000581130 -0.0005378689 -0.0000429229 -0.0000795425 -0.0000508782 -0.0000134512 -0.0000638391 0.0000242199 -0.0000335295 0.0000945392 0.0001119589 0.0000943755 0.0000033984 -0.0000679086 -0.0000459268 -0.0001132087 -0.0001406560 -0.0001095323 -0.0209013776 -0.0110318072 -0.0089937718 -0.0038012486 -0.0285741982 -0.0354307409 0.0035102543 0.0050090471 0.0014631812 0.0013618810 0.0017934704 0.0001283681 -0.0362322031 -0.0125064580 0.0425835362 -0.0316688181 -0.0414072896 -0.0045908689 -0.0237959950 -0.0074639264 0.0332702062 -0.0003893776 -0.0018531570 -0.0020841600 0.4112990517 0.1411099227 -0.4844472321 0.3602734238 0.4565643643 0.0296926872 0.2709000040 0.0990692025 -0.3578482406 0.0016619509 0.0005835327 0.0006275417 -0.0086925407 -0.0050213460 -0.0028718381 0.0978917416 0.0596823643 0.0325930969 0.0001334109 0.0000982808 0.0001909998 0.0000762799 -0.0000576932 -0.0004543992 -0.0007205705 -0.0006166504 -0.0003610826 -0.0002581680 -0.0001022454 0.0003443419 -0.0010447742 -0.0008373210 -0.0004731179 -0.0003432800 -0.0001594912 0.0003696878 0.0082981999 0.0071253843 0.0037538026 0.0027114138 0.0015493789 -0.0024170604 0.0116948987 0.0094329410 0.0053674245 0.0042099070 0.0021553411 -0.0038189306 0.0000201641 0.0011653326 0.0048061232 0.0004646513 0.0006512524 0.0013806402 -0.0045262169 -0.0055597202 -0.0189309298 -0.0000036288 0.0000102028 0.0000045626 -0.0000484215 0.0000947258 0.0000312302 0.0000504131 -0.0000807443 -0.0001592924 0.0000376558 0.0000843724 0.0000767149 -0.0000180977 -0.0000270112 -0.0000077501 -0.0000277990 0.0000053962 0.0000037755 0.0000721898 -0.0000596169 -0.0000537058 -0.0000067082 -0.0000005535 -0.0000020930 -0.0000183348 -0.0000074655 0.0000106086 0.0000625380 -0.0000199256 -0.0000040633 0.0001503286 -0.0001092488 -0.0001572645 -0.0000075400 0.0001063240 -0.0000180850 0.0002594175 0.0000270759 0.0001397692 -0.0008807663 0.0006375788 0.0005040470 -0.0000102357 -0.0000410898 0.0001804965 0.0000940381 0.0002270865 0.0000224630 0.0000016958 0.0001209845 0.0000453964 0.0001482867 -0.0000236902 0.0000414852 -0.0000084150 -0.0000064099 -0.0000171028 -0.0001259490 0.0003948709 -0.0000265594 -0.0001124368 0.0000290412 -0.0000734141 -0.0003727288 -0.0002676983 0.0000171129 0.0000129507 0.0000035036 0.0000062448 0.0002213828 -0.0001182005 -0.0004373665 -0.0002988499 -0.0002910206 -0.0002975007 -0.0000106239 0.0000020927 0.0000055870 -0.0000063725 0.0000088526 0.0000211571 0.0000047371 0.0000147906 0.0000173044 -0.0021783343 0.0015322441 0.0050931704 0.0025181625 0.0030529817 0.0030162769 0.0000199015 0.0000144416 0.0000357226 0.0000641703 -0.0000224191 -0.0001074971 -0.0000885725 -0.0001242798 -0.0000683932 -0.0000687912 -0.0000173179 -0.0001443723 -0.0000104646 0.0000201272 0.0000242645 0.0000055303 -0.0000032861 0.0000009301 -0.0000035518 0.0000033381 0.0000024157 0.0000244392 -0.0000401548 -0.0000390399 0.0008223087 0.0001652297 0.0016491346 0.0001494857 -0.0002632177 -0.0002956942 -0.0000176077 0.0000088174 -0.0000004777 -0.0000253414 0.0000054643 -0.0000233015 -0.0002418560 0.0004731218 0.0004532700 -0.0000013843 0.0000030532 -0.0000284383 -0.0000364520 -0.0000570564 0.0001357196 0.0000060452 -0.0000018210 0.0000031996 0.0000072913 -0.0000038784 -0.0000035353 -0.0000036176 0.0000067450 0.0000029408 0.0000086529 -0.0000003430 -0.0000042810 -0.0000403946 -0.0001219836 0.0000081386 0.0001658537 -0.0001663110 -0.0001124409 0.0003200515 0.0013157844 -0.0000221610 -0.0018105878 0.0018998262 0.0012358525 -0.0000443488 -0.0001776720 0.0000123086 0.0000914324 0.0000531897 -0.0000503532 0.0004713719 0.0020913260 -0.0001049199 -0.0010685786 -0.0004320834 0.0006043565 0.0000091968 -0.0000019845 0.0000047249 -0.0000070740 -0.0000053932 -0.0000039628 0.0000138166 0.0002036070 -0.0000108453 0.0001004371 -0.0001093499 0.0000676275 -0.0002314476 -0.0023773479 0.0000740157 -0.0012315672 0.0010650884 -0.0008086406 0.0000006748 0.0001782008 -0.0000079731 0.0002713959 0.0001311856 0.0001452964 -0.0001645447 -0.0018936072 -0.0000043096 -0.0029877977 -0.0015337452 -0.0015984277 -0.0000085911 -0.0001123507 0.0000658970 0.0011346069 0.0007560347 -0.0004458666 -0.0003747788 0.0007421357 -0.0006283583 -0.0004700846 0.0002088274 0.0003848790 -0.0000165116 -0.0000843707 -0.0001453713 0.0001379386 0.0000902426 -0.0000156787 0.0006644635 0.0008453509 0.0013206811 -0.0005784195 0.0005047008 0.0001363354 -0.0000014259 0.0000045408 0.0000001871 0.0000522476 0.0002574536 0.0000130917 -0.0000013942 -0.0000223639 -0.0000032494 -0.0000052480 0.0000010868 0.0000035924 0.0000297798 -0.0000255763 -0.0000117942 0.0000313575 0.0000098272 0.0000200346 -0.0000069666 0.0000001276 -0.0000040725 0.0000050208 0.0000267426 0.0000033543 -0.0000083308 -0.0000033181 -0.0000045126 -0.0000330733 -0.0003288334 -0.0000267339 -0.0000541623 -0.0000379729 -0.0000130959 -0.0000387731 0.0000078039 -0.0000245215 0.0000313841 0.0001021434 0.0000966034 -0.0000203101 -0.0000740371 -0.0000293708 -0.0001209054 -0.0001200650 -0.0000683710 -0.0163225922 -0.0080167927 -0.0069901057 -0.0000177937 -0.0015433502 -0.0022369456 0.0000226469 0.0001596144 0.0001945427 -0.0000564967 -0.0000676815 -0.0000450876 -0.0001832344 -0.0001064761 0.0001565708 0.0000430907 0.0000562018 0.0000100454 -0.0000018539 -0.0000183750 -0.0000104037 0.0000512707 0.0000678751 -0.0000048712 0.0017099424 0.0006300409 -0.0019570588 -0.0004909870 -0.0006255260 -0.0000128557 0.0000545028 -0.0000314790 -0.0000240610 0.0013390799 0.0006447251 0.0006092033 -0.0017167114 -0.0010032015 -0.0007258700 0.0179121082 0.0113543718 0.0069212314 0.0009910159 0.0004004633 -0.0007991901 0.0009329584 0.0120205592 0.0476003219 -0.0154322998 -0.0138243087 -0.0099548115 -0.0048400893 -0.0030737103 0.0019359914 0.0379653118 0.0298798676 0.0145087043 -0.0376444401 -0.0195516425 0.0314891180 0.1731814480 0.1495899763 0.0863446722 0.0571491066 0.0302597271 -0.0452781064 -0.4097860790 -0.3290740250 -0.1835166025 0.4061762793 0.2098131504 -0.3545871907 -0.0094883622 -0.1287756253 -0.5128605921 0.0002195641 0.0002681905 0.0007646508 -0.0034399826 -0.0042511863 -0.0119668621 -0.0000014822 0.0000063002 0.0000058677 0.0000422633 -0.0000101570 -0.0000169018 -0.0001373457 -0.0000305417 0.0000429867 0.0000175379 -0.0000336287 0.0000063389 0.0000103551 0.0000394741 0.0000186643 0.0000032903 -0.0000075538 -0.0000031784 0.0000393533 0.0001537643 -0.0003969004 0.0000079918 -0.0000052494 -0.0000019995 0.0000550321 0.0000436124 -0.0000465415 -0.0001402397 -0.0002110255 0.0000493883 0.0000178042 0.0000379734 -0.0000355731 0.0000017863 -0.0000857527 0.0000390978 -0.0001088433 0.0000089519 -0.0000751196 -0.0003089049 0.0002074543 0.0002130956 -0.0001788108 -0.0019404585 0.0044541848 -0.0002437586 -0.0005499154 -0.0001754121 0.0000192692 -0.0000760809 -0.0000265284 -0.0001454445 0.0000178137 -0.0000564499 0.0000328353 0.0000230030 -0.0000072108 -0.0002420494 0.0009684505 -0.0002395108 -0.0004021303 -0.0001667271 -0.0000951449 0.0021228844 0.0014784037 0.0001711278 -0.0000137288 -0.0000055067 0.0000222714 -0.0000450010 0.0000397356 0.0001105526 -0.0000049148 -0.0000193907 -0.0000212782 -0.0000087543 -0.0000160318 -0.0000425584 -0.0003760308 0.0003023007 0.0008276597 -0.0002538172 -0.0003330526 -0.0003879113 0.0005459151 -0.0004336665 -0.0013152303 0.0001426555 0.0001598961 0.0002079869 -0.0000758080 -0.0000163264 0.0000776371 0.0045059331 -0.0033327743 -0.0091743304 0.0034277238 0.0041007458 0.0041840676 -0.0000586895 -0.0000139641 -0.0001200826 -0.0000076460 0.0000160918 0.0000206948 0.0000029049 -0.0000013167 0.0000001834 -0.0000011777 0.0000034099 0.0000056800 0.0000252193 -0.0000440474 -0.0000450890 0.0006873886 0.0001414958 0.0013599805 0.0001184155 -0.0002095769 -0.0002355968 -0.0000087703 0.0000074628 0.0000088415 -0.0000249144 0.0000020712 -0.0000590068 -0.0002615730 0.0005033874 0.0005084165 0.0000309913 -0.0000117758 -0.0000566196 0.0000218428 -0.0000179413 -0.0000215759 0.0000014296 -0.0000021582 -0.0000022398 0.0000055634 -0.0000031427 -0.0000058337 -0.0000016327 0.0000028714 0.0000016683 0.0000065037 -0.0000007547 -0.0000039079 -0.0000124291 -0.0000423124 0.0000019437 0.0000397356 -0.0000374894 -0.0000267937 0.0001085922 0.0004609022 -0.0000094866 -0.0004348282 0.0004498725 0.0002953599 -0.0000281185 -0.0001266524 0.0000067699 -0.0000016679 0.0000078354 0.0000015806 0.0003240534 0.0014547880 -0.0000665531 -0.0000258876 -0.0000183512 0.0000141543 0.0000051519 -0.0000003896 0.0000025857 -0.0000032546 -0.0000031628 -0.0000018045 0.0000054025 0.0000904018 -0.0000053173 0.0000512988 -0.0000546467 0.0000344677 -0.0001027505 -0.0010676120 0.0000295387 -0.0006268983 0.0005370961 -0.0004099881 0.0000011693 0.0000922683 -0.0000035236 0.0001250365 0.0000603242 0.0000669929 -0.0000844469 -0.0009886726 -0.0000019746 -0.0013781956 -0.0007096985 -0.0007361774 -0.0000173825 -0.0000175373 0.0000018465 0.0002735008 0.0002582473 -0.0000992916 0.0000597446 -0.0000467002 0.0001601041 -0.0000378694 0.0000706587 0.0000608299 -0.0001992846 -0.0000514781 -0.0003354361 0.0003131112 -0.0011404093 0.0012486473 0.0018967976 0.0020077857 0.0033043708 0.0002632891 -0.0003942254 -0.0003358882 0.0000045464 -0.0000121621 -0.0000070864 -0.0001777077 -0.0008100747 -0.0000151208 0.0000108233 0.0000732771 0.0000066073 0.0000117014 -0.0000032403 -0.0000069629 -0.0000572560 0.0000520486 0.0000260394 -0.0000582177 -0.0000210115 -0.0000356025 0.0000124191 -0.0000003847 0.0000069236 -0.0000075977 -0.0000372720 -0.0000044070 0.0000131743 0.0000065537 0.0000067608 0.0000545925 0.0004641298 0.0000414293 0.0001051749 0.0000630674 0.0000129995 0.0000799196 -0.0000327341 0.0000345741 -0.0001192890 -0.0001323877 -0.0001147979 0.0000051157 0.0000749797 0.0000494776 0.0001485405 0.0001671279 0.0001105367 0.0364360152 0.0174125471 0.0148976418 -0.0007733958 -0.2805731791 -0.4093760519 0.0005139447 0.0265015463 0.0380265340 -0.0005144461 -0.0010533021 -0.0003856436 -0.0367433070 -0.0139766668 0.0412154340 0.0294256623 0.0364058243 0.0013754321 0.0149518408 0.0042806812 -0.0214894791 -0.0008836012 -0.0021917890 -0.0019213848 0.4008001898 0.1390329977 -0.4697750238 -0.3166301404 -0.3989492342 -0.0230551138 -0.1682702453 -0.0607367844 0.2232884938 -0.0028744305 -0.0011705534 -0.0009809749 0.0020854308 0.0011130709 0.0006782326 -0.0213303050 -0.0136216463 -0.0073754280 -0.0000777814 -0.0000398144 -0.0000510103 -0.0000164077 -0.0000329230 -0.0000909156 0.0001391715 0.0001229704 0.0000825349 0.0005198109 0.0002710218 -0.0004572262 0.0001074161 0.0000967123 0.0000929388 0.0001119614 0.0000564759 -0.0001058587 -0.0016550886 -0.0014630147 -0.0007581042 -0.0055835519 -0.0031188539 0.0047310149 -0.0013417951 -0.0011115413 -0.0006910363 -0.0013014143 -0.0006748618 0.0011564030 0.0000235831 0.0002704386 0.0010824643 -0.0000391489 -0.0000143276 -0.0006269088 0.0044194461 0.0057250736 0.0124859070 -0.0000018314 -0.0000066606 -0.0000066614 0.0000063488 -0.0000280454 -0.0000035633 0.0000012227 0.0000260683 0.0000332028 -0.0000117759 -0.0000172416 -0.0000179745 0.0000088894 0.0000022743 0.0000039404 0.0000033377 0.0000024578 -0.0000002922 -0.0000577394 0.0000450069 0.0000497885 0.0000024402 -0.0000003175 0.0000042083 -0.0000052148 -0.0000014090 -0.0000011050 0.0000063732 0.0000044563 0.0000063095 0.0000059219 0.0000052505 0.0000230878 0.0000104083 -0.0000237341 0.0000026842 -0.0000935379 -0.0000159743 -0.0000446221 0.0006969212 -0.0005246212 -0.0004002341 0.0000067414 0.0000551025 -0.0002324375 -0.0000386634 -0.0000935706 0.0000000026 0.0000062863 -0.0000181137 -0.0000077912 -0.0000929435 0.0000050130 -0.0000282739 0.0000112120 0.0000123184 -0.0000314871 0.0000026700 0.0000138952 -0.0000082570 -0.0000078393 -0.0000071668 -0.0000458835 -0.0000600903 -0.0000533932 -0.0000020242 -0.0000017343 0.0000096922 0.0000048715 0.0000643839 -0.0000842603 -0.0002028857 0.0002967262 0.0003167926 0.0003423459 0.0000171368 -0.0000011688 -0.0000112284 0.0000172445 -0.0000146144 -0.0000405658 -0.0000058826 -0.0000122832 -0.0000105862 -0.0010571852 0.0008312638 0.0023803204 -0.0031496837 -0.0034337405 -0.0036943678 -0.0000305881 -0.0000150231 -0.0000531252 -0.0001848541 0.0001218442 0.0003577853 0.0000698390 0.0001002116 0.0000480483 0.0000190448 0.0000059751 0.0000410573 0.0000098001 -0.0000146221 -0.0000145935 -0.0000052630 0.0000028105 -0.0000016139 0.0000071698 -0.0000075034 -0.0000065083 -0.0000707665 0.0001243365 0.0001292953 -0.0002484495 -0.0000589047 -0.0004911036 -0.0001002940 0.0001619462 0.0001848740 0.0000129491 -0.0000071401 0.0000070729 0.0000465633 0.0000104622 0.0001057745 0.0007588756 -0.0014144257 -0.0014480749 -0.0000000465 -0.0000004673 0.0000335455 0.0000392295 0.0000325758 -0.0000655742 -0.0000054764 0.0000019074 -0.0000055613 -0.0000038897 0.0000029717 -0.0000002030 0.0000028534 -0.0000082012 -0.0000040972 -0.0000105309 0.0000021576 0.0000068192 0.0000402444 0.0001387145 -0.0000078085 -0.0001173600 0.0001117077 0.0000776511 -0.0003541189 -0.0015149363 0.0000421361 0.0012742239 -0.0013186004 -0.0008584204 0.0000494184 0.0002150151 -0.0000123728 -0.0000201319 -0.0000252546 0.0000098401 -0.0005603037 -0.0024986269 0.0001096878 0.0003061765 0.0001340616 -0.0001680722 -0.0000068287 -0.0000010282 -0.0000025843 0.0000033676 0.0000033424 0.0000021501 -0.0000039624 -0.0000765824 0.0000047938 -0.0000387854 0.0000408053 -0.0000261338 0.0000869480 0.0009194489 -0.0000147611 0.0004776732 -0.0004100460 0.0003146027 -0.0000018531 -0.0000722217 0.0000020943 -0.0000859331 -0.0000413764 -0.0000459696 0.0000673197 0.0007675359 0.0000041956 0.0009557179 0.0004897108 0.0005132944 -0.0000130851 0.0000459051 0.0000108940 -0.0003891004 -0.0002097617 0.0001412130 -0.0001310518 0.0001238058 -0.0000182484 0.0006466372 -0.0005858477 -0.0003358880 0.0000614938 -0.0000009617 0.0001089808 -0.0001593126 0.0003937940 -0.0003990160 -0.0004813639 -0.0006626823 -0.0010374750 -0.0000363889 0.0001754725 0.0002109330 0.0000208094 -0.0001020073 -0.0000471394 0.0012665587 0.0041959923 0.0000096039 -0.0001727841 -0.0003005502 0.0000545543 0.0002118806 0.0003854110 -0.0000612452 0.0000538299 0.0000438117 -0.0000247985 0.0000313791 -0.0000353198 0.0000268439 -0.0000903941 0.0001178392 0.0000688679 -0.0000075345 -0.0000919134 -0.0000043751 0.0000034435 0.0000060396 -0.0000161522 0.0000395221 0.0012388802 0.0000661985 -0.0000390150 -0.0000270976 0.0000093487 0.0000860581 -0.0000748750 0.0000029173 -0.0000152386 0.0000280634 -0.0000443585 0.0000023833 -0.0000142246 0.0000103727 0.0000203751 0.0000009956 0.0000232095 0.0044877940 0.0020796584 0.0017138148 0.0000011054 0.0005442372 0.0007840840 0.0000022383 -0.0000479498 -0.0000737130 0.0000135270 0.0000069457 -0.0000021871 0.0000477553 0.0000194482 -0.0000511747 -0.0000702402 -0.0000881143 -0.0000042897 -0.0000479692 -0.0000133126 0.0000726903 -0.0000012517 0.0000025610 0.0000044147 -0.0004927210 -0.0001672088 0.0005723233 0.0007637859 0.0009694293 0.0000540346 0.0005448745 0.0001991091 -0.0007528192 -0.0003301720 -0.0001698342 -0.0001365773 -0.0002385309 -0.0000993264 -0.0000659210 0.0026194928 0.0014849606 0.0008397919 -0.0000042405 -0.0000066113 0.0000015146 0.0000000991 0.0000156492 0.0000694857 -0.0000040499 -0.0000041278 -0.0000017765 0.0000963530 0.0000489894 -0.0000838410 0.0000708360 0.0000570474 0.0000358303 -0.0000357177 -0.0000192298 0.0000262420 0.0000182097 0.0000235977 0.0000093223 -0.0010479880 -0.0005417652 0.0008838732 -0.0007798130 -0.0006199823 -0.0003574622 0.0003591350 0.0001894688 -0.0003187053 -0.0000158282 -0.0001825058 -0.0007352093 -0.0000253409 -0.0000325505 -0.0000757016 0.0003558924 0.0004802536 0.0011967023 0.0000171444 -0.0000096168 0.0000231452 0.0000184997 -0.0000198250 -0.0000076321 -0.0000151558 0.0000129832 0.0000282560 -0.0000046050 -0.0000157242 -0.0000101156 0.0000025141 0.0000070675 0.0000000944 0.0000060066 0.0000030051 0.0000007454 0.0000029850 -0.0000008062 -0.0000069499 0.0000027047 0.0000035226 -0.0000000518 0.0000090967 0.0000009717 -0.0000040224 -0.0000020712 0.0000117764 0.0000051294 -0.0000243862 0.0000346964 0.0000286840 -0.0000015728 -0.0000912410 0.0000047875 -0.0000589917 -0.0000064613 -0.0000284098 -0.0000409148 0.0000572506 0.0000230803 -0.0000012228 -0.0000088578 0.0000676614 -0.0000077076 -0.0000559804 -0.0000083293 -0.0000093836 -0.0000612310 -0.0000170386 -0.0000308023 0.0000019192 -0.0000102149 -0.0000043829 -0.0000092765 0.0000280575 0.0000385430 -0.0001163029 0.0000125990 -0.0000201876 0.0000080165 -0.0000487994 -0.0000220788 -0.0000162322 -0.0000074012 -0.0000360142 -0.0000208611 0.0000131790 0.0000086969 0.0000179609 0.0000211800 0.0000021873 0.0000120092 0.0000182226 0.0000224616 0.0000071227 -0.0000063730 0.0000084349 -0.0000178858 -0.0000363106 0.0000036760 -0.0000125506 -0.0000241338 0.0000857545 -0.0001073252 -0.0003215274 -0.0000991139 -0.0001216035 -0.0001423284 -0.0000300955 -0.0000067301 0.0000068779 -0.0001667535 0.0001431560 0.0003795355 0.0001407164 0.0002107855 0.0002265325 -0.0000100199 0.0000060505 -0.0000051763 -0.0000029337 0.0000092459 0.0000122466 -0.0000051736 0.0000007609 -0.0000053171 0.0000615145 0.0000256380 0.0001410623 0.0001468254 -0.0002790697 -0.0003118928 0.0000500850 -0.0000015670 0.0000650207 0.0000617891 -0.0000989740 -0.0001102863 0.0000117573 -0.0000047845 0.0000033036 -0.0008619161 -0.0001864180 -0.0016417158 -0.0017470531 0.0032357221 0.0034560857 0.0000092488 0.0000006732 -0.0000078046 0.0000116349 0.0000032963 0.0000033426 -0.0000029741 0.0000003350 -0.0000032053 -0.0000050232 0.0000024382 0.0000019660 -0.0002455408 -0.0002900851 0.0000494615 -0.0023932126 -0.0006708959 0.0015219019 -0.0018508787 -0.0051292281 0.0004796312 0.0076700727 -0.0097053868 -0.0053551808 0.0132831504 0.0540562204 -0.0014118487 -0.0874686284 0.0942806062 0.0597842080 0.0151902111 0.0783162703 -0.0025228777 0.0284928632 0.0074147934 -0.0163614778 -0.1910112691 -0.8772750191 0.0354641985 -0.2926579559 -0.1102706147 0.1652923883 0.0002588490 -0.0000768108 0.0006269504 -0.0000142725 -0.0001861939 -0.0000003827 0.0020757270 0.0155392899 0.0001564375 -0.0049644783 0.0031483660 -0.0031085334 -0.0186418365 -0.1735096473 0.0023285977 0.0477887838 -0.0395447855 0.0310932567 0.0001014668 -0.0010594971 0.0000967708 -0.0020753982 -0.0012353919 -0.0011016538 0.0008942420 0.0109549994 -0.0000229755 0.0223891705 0.0119109489 0.0119154984 0.0000044464 0.0000051995 -0.0000087554 -0.0000588979 -0.0000287480 0.0000174000 0.0000277689 -0.0000503559 0.0000474275 -0.0000389188 0.0000527137 0.0000286451 0.0000202337 -0.0000236900 -0.0000223938 0.0000218609 -0.0000605392 0.0000502539 0.0000401606 0.0000433902 0.0000588811 -0.0003116480 0.0003559652 0.0001406028 -0.0000008444 -0.0000009573 0.0000006114 -0.0000000687 0.0000017756 0.0000036817 -0.0000013050 0.0000018306 0.0000014101 0.0000026770 -0.0000019864 0.0000054340 0.0000092190 -0.0000109361 -0.0000031515 0.0002588497 0.0000191074 0.0001298215 -0.0000561201 -0.0000089299 -0.0000057274 0.0001176949 -0.0001531985 0.0000166582 0.0000319659 0.0000172838 0.0002906641 -0.0001003756 0.0008126272 0.0001211941 -0.0000064901 0.0002104043 -0.0002999447 0.0000126310 0.0000290271 -0.0000278865 -0.0000970221 -0.0000621928 0.0000407788 0.0000228881 -0.0000092779 -0.0000169976 0.0000591071 0.0000661612 0.0000236195 0.0109288537 0.0049454727 0.0042290029 0.0000054190 0.0006534307 0.0009580981 -0.0000013040 -0.0000608638 -0.0000869156 0.0000289885 0.0000133500 -0.0000022517 0.0000859287 0.0000391057 -0.0000901984 -0.0000696262 -0.0000873579 -0.0000064663 -0.0000643135 -0.0000131980 0.0001002885 -0.0000099201 -0.0000050911 0.0000124391 -0.0008816607 -0.0003165910 0.0010428302 0.0007690131 0.0009728266 0.0000683804 0.0007531172 0.0002554109 -0.0009844223 -0.0008164564 -0.0003999389 -0.0003346368 -0.0004666769 -0.0002084350 -0.0001255356 0.0053154559 0.0029843126 0.0016808834 -0.0000056596 -0.0000072782 0.0000045487 0.0000001734 0.0000085800 0.0000372656 -0.0000215630 -0.0000167016 -0.0000073888 0.0001490907 0.0000780814 -0.0001247735 0.0000651283 0.0000548516 0.0000391237 -0.0000293862 -0.0000149785 0.0000212525 0.0001976302 0.0001641340 0.0000950993 -0.0015977491 -0.0008700882 0.0013498404 -0.0007448253 -0.0005911033 -0.0003525120 0.0002959639 0.0001558500 -0.0002657760 -0.0000065289 -0.0000919913 -0.0003917822 -0.0000770950 -0.0000885826 -0.0002398857 0.0011213527 0.0012659414 0.0037703539 -0.0015964900 -0.0001689241 -0.0030929886 0.0000330915 -0.0000385558 -0.0000138450 -0.0000220877 0.0000296690 0.0000534939 -0.0000112918 -0.0000320367 -0.0000207966 0.0000096886 0.0000138192 -0.0000029111 0.0000082614 0.0000129433 0.0000111883 0.0000005559 -0.0000044784 -0.0000049125 0.0000040651 0.0000003308 0.0000058605 0.0000135752 0.0000012554 -0.0000075493 0.0000007417 0.0000123794 0.0000119982 0.0001813992 0.0000378172 0.0000109857 0.0000461785 -0.0001922411 -0.0000132592 -0.0003283096 -0.0000625393 -0.0000985167 -0.0000417895 0.0001168958 -0.0000095842 -0.0000046221 -0.0000111543 0.0001010697 -0.0000113392 -0.0000679030 -0.0000431353 0.0000017392 -0.0000585111 -0.0000296330 -0.0000950657 0.0000080744 -0.0000372479 -0.0000036529 0.0000134578 -0.0000002598 0.0000441527 -0.0001052026 0.0000062217 -0.0000464285 0.0000147046 -0.0001082516 -0.0000307645 -0.0000286510 -0.0000090228 0.0000015142 0.0000006235 -0.0000039989 0.0000029733 -0.0000045360 -0.0000105956 0.0000118838 0.0000128581 0.0000120487 -0.0000000539 0.0000009201 0.0000012948 0.0000118673 -0.0000146037 -0.0000353530 0.0000642557 0.0000729177 0.0000756713 -0.0000464939 0.0000417542 0.0001288465 -0.0001264551 -0.0001410986 -0.0001378428 0.0000025211 0.0000011329 0.0000034598 -0.0001895778 0.0001526616 0.0004201915 -0.0007414562 -0.0008424869 -0.0008496765 0.0009195577 -0.0001270890 0.0010922075 -0.0007684468 0.0015472978 0.0019722332 -0.0005700631 0.0007796129 0.0005370067 -0.0135456031 -0.0056752161 -0.0307225754 -0.0272654286 0.0506069267 0.0556476175 -0.0077296375 -0.0010387313 -0.0142095499 0.0111049086 -0.0185029478 -0.0204934075 -0.0000855210 -0.0001347317 -0.0005044617 0.1875904554 0.0411324405 0.3541498720 0.3189204875 -0.5837477567 -0.6214718758 -0.0000000654 -0.0000000385 -0.0000012976 -0.0000019297 -0.0000004491 -0.0000015387 -0.0000987515 0.0001738348 0.0002480985 0.0000260590 0.0000013479 0.0000565310 -0.0000003884 -0.0000000990 0.0000001435 -0.0000105895 -0.0000051577 0.0000055445 -0.0000086483 -0.0000226232 0.0000028571 0.0000371320 -0.0000474464 -0.0000255312 0.0000572235 0.0002331666 -0.0000017162 -0.0004281614 0.0004599736 0.0002965056 0.0000789092 0.0004095895 -0.0000115133 0.0001518988 0.0000390071 -0.0000863691 -0.0009989588 -0.0045984451 0.0001827671 -0.0015683047 -0.0005917113 0.0008856885 0.0000047769 0.0000027937 0.0000052357 -0.0000109353 0.0000282794 -0.0000147233 0.0000089627 0.0000839712 -0.0000035375 -0.0000179117 0.0000095623 -0.0000108818 -0.0000996882 -0.0009805114 0.0000127210 0.0001586726 -0.0001379336 0.0001133701 0.0000075996 -0.0000241132 0.0000052259 -0.0000330277 -0.0000113158 -0.0000174515 0.0000048489 0.0001998806 -0.0000021656 0.0003449464 0.0001722387 0.0001871482 0.0000042739 0.0000068836 -0.0000058956 -0.0000729834 -0.0000375022 0.0000155879 0.0000010743 -0.0000203372 0.0000190240 -0.0000188329 0.0000279163 0.0000253528 0.0000064557 0.0000341069 0.0000012183 0.0001040363 -0.0001973138 0.0003188727 -0.0001653800 -0.0001019904 -0.0003484186 -0.0000257081 0.0000031610 -0.0000014872 -0.0000108071 0.0000481139 0.0000024987 -0.0000706433 -0.0001252370 0.0000234754 0.0000426262 0.0000013629 -0.0000248832 0.0001261253 -0.0000818522 0.0001223467 -0.0000781605 -0.0000477718 0.0000499608 -0.0000608878 0.0000798085 -0.0000328117 -0.0000372252 0.0004638206 -0.0001030023 0.0000949798 -0.0002303463 0.0000517755 -0.0000581621 -0.0001040223 -0.0000506339 0.0000017460 0.0030860858 0.0001164970 -0.0000966933 -0.0000430090 -0.0000079493 -0.0000009133 -0.0000205599 0.0000018795 0.0000358620 0.0000451196 -0.0000037593 -0.0000110768 -0.0000181359 0.0000010412 -0.0000295895 -0.0000412305 -0.0000159632 -0.0059406738 -0.0026777409 -0.0022929048 -0.0000011545 -0.0002674000 -0.0003599568 -0.0000034992 0.0000193713 0.0000368929 -0.0000191543 -0.0000092908 0.0000042246 0.0000035116 -0.0000055265 -0.0000094603 0.0000694581 0.0000877821 0.0000092782 0.0000654694 0.0000161852 -0.0000943559 0.0000093877 0.0000091987 -0.0000027986 -0.0000887182 -0.0000331922 0.0001116405 -0.0007820714 -0.0010004274 -0.0000495030 -0.0007483276 -0.0002657020 0.0009942175 0.0004499245 0.0002128750 0.0001791076 0.0002070381 0.0000977858 0.0000556403 -0.0024444234 -0.0013663934 -0.0007452039 0.0000010437 0.0000013596 -0.0000014268 -0.0000002439 -0.0000145321 -0.0000604806 0.0000044916 0.0000033002 0.0000025941 -0.0000353744 -0.0000186769 0.0000293445 -0.0000452084 -0.0000360402 -0.0000202998 0.0000285678 0.0000154438 -0.0000204296 -0.0000281995 -0.0000155093 -0.0000070239 0.0003545581 0.0002285731 -0.0002924695 0.0005003085 0.0004134324 0.0002192170 -0.0002922133 -0.0001398619 0.0002624212 0.0000103839 0.0001824366 0.0006633208 0.0000409697 0.0000458458 0.0001356478 -0.0006299006 -0.0007279147 -0.0021399418 0.0000256117 -0.0000273355 0.0000086053 -0.0000116557 0.0000130619 0.0000037680 0.0000140020 -0.0000031553 -0.0000145471 0.0000001478 0.0000029463 0.0000045759 0.0000021163 -0.0000000004 -0.0000016639 0.0000009296 0.0000135765 0.0000074248 -0.0000059304 -0.0000010880 0.0000078209 0.0000056098 -0.0000031551 0.0000101953 -0.0000089192 -0.0000025827 0.0000034430 0.0000105360 0.0000028188 -0.0000032023 0.0000613671 -0.0000163679 -0.0000476413 0.0000063818 -0.0001340908 -0.0000176204 -0.0000959989 -0.0000331991 -0.0000482731 0.0000410346 -0.0000056903 -0.0000387460 -0.0000031981 0.0000255255 -0.0000603440 0.0000186747 0.0000143536 -0.0000256176 0.0000054611 0.0000070124 -0.0000130002 -0.0000970751 -0.0000015647 -0.0000482932 0.0000028225 0.0000480852 -0.0000835243 -0.0000063005 0.0000254012 0.0000029637 -0.0000000031 0.0000087962 0.0000079347 -0.0000897071 -0.0000659443 0.0000019994 -0.0000054463 0.0000047941 0.0000193255 0.0000094416 -0.0000093592 -0.0000242116 0.0000459355 0.0000477547 0.0000511029 -0.0000067140 -0.0000106144 -0.0000117803 -0.0001398607 0.0001293947 0.0003419450 -0.0002258764 -0.0002706850 -0.0002874100 -0.0001375559 0.0000994333 0.0003235992 -0.0005170574 -0.0005313562 -0.0005631215 -0.0000030060 0.0000024333 0.0000034612 0.0017965969 -0.0013652585 -0.0038971928 0.0026994559 0.0031293699 0.0031565488 0.0000112494 0.0000229533 0.0000534383 0.0000332922 -0.0000444176 -0.0000412478 -0.0000186984 0.0000145742 0.0000004955 -0.0000572963 -0.0000196584 -0.0001170880 0.0000068173 -0.0000228270 -0.0000360591 -0.0003079517 -0.0000810670 -0.0007099108 -0.0003087845 0.0004952736 0.0005116973 0.0000239184 -0.0000151535 -0.0000001377 0.0006708027 0.0001459732 0.0012647068 -0.0001719059 0.0003542063 0.0003896058 -0.0000006610 -0.0000012412 -0.0000001016 0.0000031698 0.0000000813 0.0000012718 -0.0000083313 0.0000031690 -0.0000059651 -0.0000086005 0.0000059991 0.0000035754 0.0000471802 -0.0000714302 -0.0000051813 0.0006656440 0.0002738776 0.0000175453 0.0001659104 0.0007739522 -0.0000267997 -0.0008241192 0.0013029622 0.0005891516 -0.0018521786 -0.0075557833 0.0001943884 0.0102546510 -0.0111617581 -0.0070567672 -0.0031052347 -0.0154749273 0.0009845133 -0.0044805749 -0.0011850162 0.0026290668 0.0383369784 0.1771463490 -0.0073913671 0.0459916468 0.0171650826 -0.0260602820 0.0021279026 -0.0015510500 0.0013714746 0.0001036826 -0.0003450886 0.0000032418 0.0104648730 0.0814229648 -0.0009032470 -0.0209460650 0.0130897137 -0.0132996768 -0.1004663796 -0.9227463710 0.0130886294 0.1998699559 -0.1644530412 0.1302509646 0.0000160814 -0.0039552871 0.0002148343 -0.0066839557 -0.0046998405 -0.0034731660 0.0032692218 0.0400146573 -0.0000519672 0.0727365794 0.0391390936 0.0388013361 0.0000011971 0.0000073313 0.0000001837 -0.0000652094 -0.0000585102 0.0000314046 0.0000151688 -0.0000326657 0.0000255988 0.0000461157 -0.0000546619 -0.0000322203 -0.0000064419 0.0000048863 -0.0000010038 0.0000144421 -0.0000449847 0.0000457397 0.0000058518 0.0000173884 0.0000106949 0.0000484567 -0.0000673863 -0.0000449623 0.0000009429 -0.0000395748 -0.0002604115 -0.0002126879 -0.0001467778 -0.0000579711 0.0001320325 0.0000493398 -0.0000221866 -0.0000425305 0.0000249003 0.0000021200 0.0002101206 -0.0000877588 -0.0001130785 0.0000167480 0.0000104392 0.0000028317 0.0000021044 0.0000000079 -0.0000054344 -0.0000013043 0.0000023891 -0.0000007829 0.0000012542 0.0000011776 0.0000006927 -0.0000043706 -0.0000429131 -0.0000029102 0.0000054092 -0.0000161917 0.0000381029 -0.0000965388 -0.0002105011 0.0003458903 -0.0000759269 0.0000048860 -0.0000963794 0.0000171134 -0.0000018772 0.0000182298 0.0000581811 0.0000685481 0.0000557307 0.0102283369 0.0044812781 0.0039804664 0.0000044177 0.0001411897 0.0002060599 -0.0000019837 -0.0000139698 -0.0000161912 0.0000226039 0.0000094075 -0.0000112546 0.0000245521 0.0000173608 -0.0000221178 0.0000051726 0.0000069208 -0.0000001746 0.0000154214 0.0000189579 -0.0000168993 -0.0000149368 -0.0000126903 0.0000111479 -0.0002378745 -0.0000970989 0.0002823529 -0.0000422049 -0.0000490487 0.0000007186 -0.0001990525 -0.0000693497 0.0002609376 -0.0007712727 -0.0003645254 -0.0003068387 -0.0003398568 -0.0001689327 -0.0000931334 0.0040579506 0.0022540445 0.0012485960 -0.0000027034 -0.0000065893 0.0000332429 0.0000260641 -0.0001780327 -0.0007580940 0.0000473174 0.0000399012 0.0000424788 0.0002940219 0.0001821395 -0.0001859338 -0.0005059240 -0.0003487439 -0.0001940201 0.0002990535 0.0001393781 -0.0002225930 -0.0005013779 -0.0004463420 -0.0002535669 -0.0034654875 -0.0017969491 0.0027586438 0.0050724081 0.0040701121 0.0022738672 -0.0030681961 -0.0015598359 0.0025814486 0.0000726518 0.0021682239 0.0083275652 -0.0000660429 -0.0000757043 -0.0002170767 0.0010035575 0.0011104272 0.0034338559 -0.0000022902 -0.0000002169 -0.0000039926 0.0000179995 -0.0000208822 -0.0000059307 -0.0000133032 0.0000113941 0.0000267962 -0.0000048096 -0.0000080327 -0.0000104013 0.0000014044 0.0000007312 0.0000008068 0.0000003103 -0.0000008275 0.0000005124 0.0000063892 -0.0000108308 0.0000013485 -0.0000002871 -0.0000016495 0.0000012497 0.0000080782 0.0000018383 -0.0000036138 0.0000016314 -0.0000010024 0.0000100034 0.0000039456 -0.0000013313 -0.0000026177 0.0000025148 0.0000072005 -0.0000015295 -0.0000136662 -0.0000013502 -0.0000082506 -0.0001014182 0.0000738343 0.0000596058 0.0000013783 0.0000213458 -0.0000812061 0.0000164274 0.0000532634 -0.0000040284 0.0000027620 0.0000076597 -0.0000015475 -0.0000053414 0.0000024365 -0.0000018607 0.0000026574 0.0000087282 -0.0000188137 0.0000007732 0.0000102677 -0.0000103200 -0.0000382290 0.0000047293 -0.0000897418 0.0000084006 0.0000017608 -0.0000029501 -0.0011553978 0.0007378620 0.0025874999 0.0008739171 -0.0002766473 -0.0012409513 -0.0009500501 -0.0012440483 -0.0016169940 -0.0011887257 -0.0011336895 -0.0009533340 -0.0175007697 0.0167396466 0.0438064505 -0.0353654099 -0.0419290514 -0.0443563282 -0.0069328100 0.0046225744 0.0150393262 0.0134506874 0.0140361067 0.0155935458 -0.0000358965 0.0002063082 0.0007074567 0.2318857933 -0.1777801202 -0.5028002774 0.4216550594 0.4849734292 0.4899108585 0.0000036584 0.0000012073 0.0000078072 0.0000066258 -0.0000110926 -0.0000123556 -0.0000002696 0.0000013540 0.0000017866 -0.0000239481 -0.0000082116 -0.0000504442 -0.0000309739 0.0000583003 0.0000653483 -0.0000441044 -0.0000105336 -0.0000858693 -0.0000749914 0.0001254193 0.0001366835 0.0000000799 -0.0000004294 -0.0000010406 0.0003069822 0.0000641664 0.0005738066 0.0003700174 -0.0006821740 -0.0007314647 -0.0001598853 -0.0001663405 -0.0003208202 0.0000425619 -0.0000111791 -0.0000853831 -0.0000003968 0.0000002262 0.0000001774 0.0000000412 -0.0000000532 0.0000001116 -0.0000159573 -0.0000193110 0.0000147030 -0.0000026326 -0.0000051080 -0.0000014398 0.0000086340 0.0000028410 -0.0000042054 -0.0000083347 -0.0000012293 0.0000041195 -0.0000153635 -0.0000116374 0.0000050447 0.0000569503 -0.0000487937 -0.0000379181 0.0000187995 0.0001032287 -0.0000023907 0.0000348559 0.0000100581 -0.0000203613 -0.0002394461 -0.0011369764 0.0000448726 -0.0003611104 -0.0001295960 0.0001982819 -0.0000122539 0.0000108782 -0.0000065648 -0.0000006143 0.0000006095 -0.0000002455 -0.0000707474 -0.0005477774 0.0000048394 0.0001422175 -0.0000887376 0.0000896116 0.0006759288 0.0062225323 -0.0000874663 -0.0013629154 0.0011216915 -0.0008854260 0.0000001320 0.0000287854 -0.0000017373 0.0000442405 0.0000309965 0.0000226931 -0.0000256219 -0.0002921383 -0.0000006932 -0.0004861610 -0.0002598466 -0.0002592577 0.0000028747 0.0000026953 -0.0000055283 -0.0000275477 -0.0000142098 0.0000087492 0.0000030610 -0.0000141367 0.0000150004 -0.0000288461 0.0000306033 0.0000313907 0.0000153457 0.0000076736 0.0000189758 -0.0000133218 0.0000373000 -0.0000463708 -0.0001336335 -0.0001503098 -0.0002438894 -0.0000314022 0.0000600021 0.0000386238 0.0000031561 -0.0000078063 -0.0000073028 -0.0000716477 -0.0003504052 -0.0000157994 0.0000042765 0.0000313703 0.0000030864 0.0000045966 -0.0000049795 -0.0000040575 -0.0000429633 0.0000405485 0.0000178945 -0.0000650367 -0.0000000688 -0.0000414735 0.0000208751 0.0000004305 0.0000116533 0.0000206378 0.0001098210 -0.0000112289 0.0000083760 0.0000548126 0.0001076568 -0.0001940431 -0.0013032764 -0.0000177357 0.0000875183 0.0000759782 -0.0000091675 0.0000624148 -0.0000154518 0.0000344388 -0.0000726957 -0.0001601315 -0.0001229487 -0.0000052449 0.0000857236 0.0000356386 0.0001350819 0.0001869563 0.0001093289 0.0370838143 0.0169033570 0.0143411700 0.0000146323 0.0008256207 0.0011800884 -0.0000098858 -0.0000792914 -0.0001006112 0.0000991042 0.0000573407 0.0000032322 0.0000889496 0.0000779636 -0.0000489317 -0.0000587275 -0.0000753189 -0.0000135007 -0.0000784059 0.0000006432 0.0001345731 -0.0000685735 -0.0000747555 0.0000241758 -0.0006591889 -0.0002713125 0.0007389846 0.0007374086 0.0009500482 0.0000702764 0.0009374015 0.0002993540 -0.0011844397 -0.0027944534 -0.0013429414 -0.0011241944 -0.0007611913 -0.0002728604 -0.0001723835 0.0093026182 0.0049170664 0.0028311826 -0.0002201225 -0.0001769427 -0.0000409041 -0.0000307882 0.0000086277 0.0001217005 -0.0000285143 -0.0000076215 0.0000224157 0.0041328791 0.0021348481 -0.0035471453 0.0005434496 0.0005021607 0.0005073572 -0.0001120436 -0.0000592685 0.0000695858 -0.0002385921 -0.0002112095 -0.0000565977 -0.0466413364 -0.0241155505 0.0395673537 -0.0062332333 -0.0050761412 -0.0031106076 0.0010012658 0.0005025852 -0.0008822039 0.0000031354 -0.0002270491 -0.0009229765 -0.0003836586 -0.0004565778 -0.0012702808 0.0059405107 0.0070866064 0.0200760321 0.0002478374 -0.0008069326 -0.0011150612 0.0000895352 -0.0001071639 -0.0000299099 -0.0000638889 0.0000772784 0.0001543898 -0.0000386834 -0.0000772682 -0.0000675859 0.0000372503 0.0000131725 0.0000214095 0.0000074133 -0.0000110298 -0.0000125356 -0.0000472690 -0.0000449456 -0.0000870067 -0.0000055228 0.0000049272 0.0000018976 0.0000405980 0.0000054315 -0.0000212892 -0.0000211958 0.0000152383 0.0000207717 -0.0002277797 0.0000715406 0.0001218027 0.0000181925 0.0000212551 0.0000459797 -0.0000806990 0.0000047887 -0.0001299173 -0.0004731095 0.0008583105 0.0005581959 -0.0000123546 -0.0003193545 0.0005378904 0.0008838210 -0.0000443766 -0.0004029881 -0.0000149104 -0.0001062269 -0.0000409628 -0.0001703705 0.0000418478 -0.0000093033 0.0000267001 0.0000084862 -0.0000346517 0.0000827332 -0.0001994432 -0.0000038836 -0.0000110202 -0.0000072557 -0.0001031945 0.0001128667 0.0000678086 -0.0000143648 -0.0000181022 0.0000200520 0.0000399109 0.0000142636 0.0000025380 -0.0000044523 -0.0001263125 -0.0001306478 -0.0001469300 0.0000233767 0.0000427553 0.0000565623 0.0005768589 -0.0003941414 -0.0011603921 -0.0005244011 -0.0005444729 -0.0005147657 -0.0000343553 0.0000392667 0.0001201820 0.0014981139 0.0015012770 0.0016778268 0.0000233405 0.0000010417 -0.0000055141 -0.0060774370 0.0045651451 0.0129598100 0.0052380796 0.0059909306 0.0059596011 0.0109826880 -0.0008529216 0.0156146680 -0.0310714100 0.0513109618 0.0554594415 -0.0014434281 -0.0012068244 -0.0042178725 0.0133374222 0.0021751238 0.0235760445 -0.0043740417 0.0062559238 0.0054604494 -0.0885460257 -0.0141632464 -0.1720039021 0.3480241251 -0.5738246889 -0.6269360334 -0.0001997246 0.0006954077 0.0014496821 -0.1449001819 -0.0295769855 -0.2680576725 0.0360627027 -0.0644915912 -0.0676389310 0.0000000528 0.0000015301 0.0000026967 -0.0000159353 -0.0000024997 -0.0000068849 0.0001941892 -0.0002301368 -0.0002433495 -0.0002538283 -0.0001154235 -0.0006571041 0.0000013181 -0.0000030228 -0.0000013202 0.0000003922 0.0000046889 0.0000006684 0.0000085740 0.0000337897 -0.0000011892 -0.0000211157 0.0000230997 0.0000140194 -0.0000841100 -0.0003557992 0.0000072289 0.0002465250 -0.0002584949 -0.0001691874 -0.0000105547 -0.0000627321 0.0000021782 -0.0000320084 -0.0000116100 0.0000183776 0.0001437266 0.0006880581 -0.0000181437 0.0003474964 0.0001312689 -0.0001984476 -0.0000071482 -0.0000096843 -0.0000034994 -0.0000048751 0.0000018662 -0.0000092301 0.0000187830 0.0001107281 0.0000028071 -0.0000362736 0.0000194683 -0.0000233087 -0.0001561049 -0.0012780695 -0.0000148864 0.0003274574 -0.0002725248 0.0002113042 0.0000056600 -0.0000013390 0.0000017276 -0.0000090903 -0.0000019846 -0.0000043902 -0.0000041347 0.0000226583 -0.0000090978 0.0000952231 0.0000527797 0.0000516068 0.0000139546 0.0000210094 -0.0000291950 -0.0001980264 -0.0001084818 0.0000690725 0.0000435812 -0.0001298949 0.0000914974 -0.0001277974 0.0001608450 0.0001048921 0.0001172707 -0.0000054556 0.0001117541 -0.0001948381 0.0004537285 -0.0005795333 -0.0007855520 -0.0007870534 -0.0013185802 -0.0005166196 0.0006606276 0.0003970385 0.0000318883 -0.0000811092 -0.0000815864 -0.0007619685 -0.0038279848 -0.0001526195 0.0000462916 0.0003410461 0.0000344856 0.0000730667 -0.0000404448 -0.0000502870 -0.0004507933 0.0004393135 0.0001759863 -0.0004414843 -0.0001441888 -0.0003003795 0.0000948673 0.0000009827 0.0000507263 -0.0000504275 -0.0002006116 -0.0000171786 0.0001211051 0.0000345065 0.0000447366 0.0003972749 0.0027467743 0.0002544278 0.0008669961 0.0006458070 0.0002291784 0.0006317972 -0.0001498844 0.0004488104 -0.0006432950 -0.0018273027 -0.0015634937 -0.0001570856 0.0011198823 0.0006198640 0.0014822649 0.0020952805 0.0012928940 0.4126785178 0.1881337152 0.1595987459 0.0001782955 0.0092516660 0.0132637966 -0.0001046253 -0.0008853100 -0.0011327060 0.0010929345 0.0006307398 0.0000343564 0.0009731822 0.0008541368 -0.0005398142 -0.0006810939 -0.0008720417 -0.0001511716 -0.0008429744 0.0000215670 0.0014587305 -0.0007313612 -0.0007934229 0.0002722929 -0.0071888284 -0.0029889280 0.0081007428 0.0085218261 0.0109324849 0.0008085368 0.0100736683 0.0031410845 -0.0126861003 -0.0311339848 -0.0149207421 -0.0124954375 -0.0083176363 -0.0030034178 -0.0019028132 0.1024571536 0.0541521630 0.0312005108 -0.0026362840 -0.0021057556 -0.0005043164 -0.0003664538 0.0001198448 0.0014913811 -0.0003378520 -0.0001000304 0.0002476292 0.0492538413 0.0254529834 -0.0422535435 0.0062618555 0.0058275632 0.0059225575 -0.0013611629 -0.0007228128 0.0008702443 -0.0026219033 -0.0023145841 -0.0006028221 -0.5560420159 -0.2875177233 0.4715133165 -0.0719662031 -0.0589083245 -0.0357780800 0.0123996050 0.0062595192 -0.0108927364 -0.0000033368 -0.0027870737 -0.0112534085 -0.0042833205 -0.0051168581 -0.0141374635 0.0660794538 0.0793529608 0.2233294849 -0.0000527640 0.0000414275 0.0000463043 0.0009663648 -0.0011297184 -0.0002917489 -0.0006956532 0.0006408467 0.0014704818 -0.0002785600 -0.0006225071 -0.0005615501 0.0001289653 0.0001530176 0.0000643212 0.0000395695 -0.0000331651 0.0000174819 0.0000202117 -0.0000411541 -0.0001950608 0.0000171404 -0.0000126612 0.0000045500 0.0004570246 0.0000911689 -0.0002122022 -0.0002909248 0.0001214639 0.0002241461 0.0001387748 0.0002425663 0.0000921293 0.0001043546 -0.0004540453 0.0001007661 -0.0011430429 -0.0000023175 -0.0006180401 -0.0007448683 0.0011936108 0.0009119530 0.0000535219 -0.0007855459 0.0011063254 -0.0000321221 0.0003545220 -0.0001777084 0.0000280968 -0.0005890121 -0.0002437687 -0.0007485430 0.0001549301 -0.0001513419 0.0000674979 0.0000778527 -0.0000158456 0.0008247407 -0.0021132395 -0.0000854816 -0.0001380530 -0.0001163437 -0.0010580126 0.0017874967 0.0011794826 -0.0001140366 -0.0002118238 0.0002236395 0.0004742231 0.0001282505 0.0000357468 -0.0000085921 -0.0012366481 -0.0012733011 -0.0014446207 0.0002944528 0.0005131569 0.0006699206 0.0070239241 -0.0048121044 -0.0141584372 -0.0062657232 -0.0064789832 -0.0061245721 -0.0002046096 0.0003184012 0.0009854331 0.0147748086 0.0146966461 0.0166007062 0.0002775610 0.0000011203 -0.0000803812 -0.0741538379 0.0556583451 0.1581331913 0.0624237483 0.0712951729 0.0710221251 -0.0012366085 0.0000926824 -0.0017705496 0.0033863031 -0.0056021240 -0.0060683595 0.0002171136 -0.0000232057 0.0002558677 0.0016109016 0.0003366760 0.0029844532 -0.0004639574 0.0006457809 0.0005465872 0.0099140301 0.0015123816 0.0192075675 -0.0379438368 0.0626046391 0.0684502155 0.0001697045 -0.0001090583 -0.0000224428 -0.0178397969 -0.0037250998 -0.0332628627 0.0035394887 -0.0064557132 -0.0063321595 0.0000001179 0.0000265983 0.0000408505 -0.0001818030 -0.0000302104 -0.0000809163 -0.0000586296 0.0000069363 -0.0000557823 -0.0000279449 0.0000353905 0.0000699044 0.0000163793 -0.0000351120 -0.0000168754 -0.0000192289 0.0000386853 0.0000191594 0.0000847846 0.0003371620 -0.0000110872 -0.0002010080 0.0002128579 0.0001333980 -0.0008233163 -0.0035730467 0.0000972698 0.0023582681 -0.0024440745 -0.0015822554 -0.0000468148 -0.0003544284 -0.0000007370 -0.0002735525 -0.0001038574 0.0001545983 0.0007313293 0.0037011908 -0.0001027273 0.0030534884 0.0011573058 -0.0017015076 -0.0000292836 -0.0000290369 -0.0000147421 0.0000174292 0.0000203935 0.0000088693 0.0000598440 0.0002695788 0.0000105065 -0.0001929957 0.0001554361 -0.0001269563 -0.0004116301 -0.0028815065 -0.0000019302 0.0020992452 -0.0017505327 0.0013740104 -0.0000142620 -0.0002398391 0.0000023083 -0.0001908613 -0.0000975576 -0.0001012379 0.0002362301 0.0025549402 0.0000207104 0.0022101299 0.0011364541 0.0011905732 0.0000823427 0.0002144794 -0.0002740842 -0.0017850205 -0.0009590365 0.0004634055 0.0004768255 -0.0013754597 0.0010237042 -0.0010460716 0.0014579193 0.0009437494 0.0012592952 0.0004875338 0.0015448150 -0.0009752629 0.0031840100 -0.0036855697 -0.0112746818 -0.0113112609 -0.0204649040 -0.0035266360 0.0053747553 0.0034368969 -0.0000267111 0.0000413104 0.0001945342 0.0003020215 0.0008877339 0.0000448488 -0.0001036478 -0.0001242513 0.0000174297 0.0000519348 -0.0000270640 -0.0000168043 -0.0002567820 0.0001697506 0.0001292219 -0.0001141889 -0.0000417276 -0.0000716053 0.0000197241 -0.0000011936 0.0000161613 -0.0000105701 -0.0000460214 -0.0000042339 0.0000280620 0.0000096213 0.0000135859 0.0000894168 0.0006259233 0.0000566657 0.0001999675 0.0001602890 0.0000243531 0.0002233146 0.0001036259 -0.0001425598 -0.0001007998 -0.0004199173 -0.0002891675 -0.0000387618 0.0002613279 0.0001207570 0.0003060460 0.0004349746 0.0002589833 0.0874354428 0.0400183032 0.0338022838 0.0000362534 0.0020040799 0.0028843223 -0.0000300427 -0.0001948521 -0.0002437441 0.0002362931 0.0001254485 0.0000166363 0.0002078525 0.0001895698 -0.0001028482 -0.0001707204 -0.0002260678 -0.0000429195 -0.0001865875 -0.0000111781 0.0003596189 -0.0001517825 -0.0001718468 0.0000439777 -0.0014797642 -0.0006188780 0.0016654168 0.0021646907 0.0027490888 0.0002132883 0.0024412397 0.0006871583 -0.0030282225 -0.0065922491 -0.0031633181 -0.0026468569 -0.0017028477 -0.0005777515 -0.0003770803 0.0209358469 0.0110087150 0.0063409851 -0.0005916694 -0.0004885980 -0.0000802266 -0.0000541752 -0.0000960277 -0.0001933949 -0.0000087621 0.0000325860 0.0001181240 0.0115799956 0.0060217282 -0.0099105042 0.0015009765 0.0014632260 0.0014097202 -0.0000748827 -0.0000777364 -0.0000001287 -0.0014873506 -0.0012244539 -0.0005439998 -0.1310405663 -0.0677369367 0.1112104789 -0.0178172897 -0.0148386063 -0.0089138728 0.0002142820 0.0001430553 -0.0003214818 0.0000307729 0.0009947250 0.0034129277 -0.0009317934 -0.0011139488 -0.0030726073 0.0143634442 0.0172804331 0.0485501505 -0.0000204690 -0.0000015389 -0.0000261191 0.0002102498 -0.0002468596 -0.0000629617 -0.0001448717 0.0001457167 0.0003280264 -0.0000652704 -0.0001357100 -0.0001276490 0.0000305234 0.0000301078 0.0000153472 0.0000049489 -0.0000068810 0.0000047703 0.0000041263 -0.0000133074 -0.0000427852 0.0000038552 -0.0000024810 0.0000031658 0.0000960344 0.0000186782 -0.0000457576 -0.0000524953 0.0000299562 0.0000517674 0.0000528522 0.0000327820 -0.0000011247 0.0000278768 -0.0000754233 0.0000193332 -0.0002447367 -0.0000009975 -0.0001364870 -0.0002048888 0.0002867656 0.0002433271 0.0000132265 -0.0002018326 0.0001995640 0.0000276014 0.0001652418 -0.0000533024 0.0000064386 -0.0001253519 -0.0000538849 -0.0001885125 0.0000342617 -0.0000409510 0.0000206086 0.0000187570 -0.0000220894 0.0001733873 -0.0004405090 -0.0000217357 -0.0000429398 -0.0000223375 -0.0002702277 0.0003014903 0.0001912340 -0.0000293787 0.0010736551 -0.0005651634 -0.0022258199 -0.0005150066 -0.0004342166 -0.0003482647 0.0048814632 0.0048696200 0.0049419773 -0.0017391426 -0.0021403599 -0.0024589494 -0.0300019149 0.0205282233 0.0605991013 0.0293630665 0.0303958780 0.0291121040 -0.0003301091 0.0009432148 0.0021196426 -0.0542040122 -0.0555180588 -0.0599907885 -0.0000939117 0.0003404013 0.0010976536 0.3176281662 -0.2378931846 -0.6768497556 -0.2967965637 -0.3378915645 -0.3390620621 -0.0001247883 0.0000036482 -0.0001905961 0.0003050435 -0.0005111162 -0.0005603110 0.0000461059 -0.0000539747 -0.0000370168 0.0010547609 0.0002017046 0.0019195519 -0.0003577292 0.0005260703 0.0004739014 0.0010288267 0.0001539787 0.0019949120 -0.0034512924 0.0056967239 0.0062395415 0.0000388368 -0.0000112343 0.0000318461 -0.0116109557 -0.0023992846 -0.0215498623 0.0030011230 -0.0054149264 -0.0055963782 -0.0001768195 -0.0002163906 -0.0004448608 0.0001183815 -0.0000291469 -0.0001786471 -0.0000082930 -0.0000062505 -0.0000230787 -0.0000113967 0.0000068500 0.0000042411 0.0000127097 0.0000125222 -0.0000082276 -0.0000099953 0.0000147082 0.0000063271 0.0000067876 0.0000408065 -0.0000000673 -0.0000257342 0.0000292793 0.0000171599 -0.0001032253 -0.0004714088 0.0000160202 0.0003160748 -0.0003366175 -0.0002108439 0.0000029416 -0.0000260040 -0.0000067537 -0.0000553342 -0.0000204044 0.0000313051 0.0000164673 0.0001984536 -0.0000037963 0.0006118124 0.0002299889 -0.0003367396 -0.0000092390 -0.0000064556 -0.0000057392 0.0000039577 0.0000064271 0.0000019980 0.0000062246 0.0000067944 0.0000029610 -0.0000307916 0.0000270592 -0.0000201986 -0.0000152597 -0.0000307462 0.0000146840 0.0003596669 -0.0002990082 0.0002317730 -0.0000036478 -0.0000553763 0.0000003251 -0.0000377963 -0.0000182259 -0.0000199636 0.0000551924 0.0005917913 0.0000021389 0.0004442019 0.0002271935 0.0002363729 0.0000126971 0.0000490150 -0.0000551134 -0.0003731814 -0.0002017946 0.0000937059 0.0000997318 -0.0002967294 0.0002113109 -0.0001762621 0.0002705349 0.0001631202 0.0002753387 0.0001349321 0.0003776439 -0.0002394413 0.0007681630 -0.0008871508 -0.0026693033 -0.0026585570 -0.0047961709 -0.0005663290 0.0009415046 0.0006535013 -0.0000016873 0.0000044555 0.0000000113 0.0000268918 0.0001511782 0.0000051702 0.0000004119 -0.0000128571 -0.0000025413 -0.0000024532 0.0000020701 0.0000063748 0.0000396090 -0.0000363776 -0.0000161776 0.0001669983 0.0000182219 0.0000957983 -0.0000430017 -0.0000032165 -0.0000136584 0.0000209624 -0.0002363867 0.0000025973 0.0000456796 0.0000017182 0.0001139368 0.0001755480 0.0020680170 0.0001282155 -0.0000743753 0.0000399844 -0.0001435653 -0.0000408759 0.0000188200 -0.0000326090 -0.0000024560 0.0000920389 0.0001232668 0.0000133958 -0.0000737679 -0.0000407686 -0.0000773208 -0.0001021967 -0.0000780583 -0.0207539188 -0.0095298794 -0.0080835651 -0.0000098769 -0.0003200708 -0.0004609794 0.0000073147 0.0000333749 0.0000379365 -0.0000524205 -0.0000364318 -0.0000092434 -0.0000301430 -0.0000393414 0.0000019531 0.0000200880 0.0000282313 0.0000097134 0.0000360834 -0.0000024693 -0.0000652785 0.0000369411 0.0000431818 -0.0000111720 0.0001347426 0.0000799558 -0.0001435849 -0.0002918192 -0.0003726303 -0.0000292213 -0.0004540289 -0.0001402995 0.0005591275 0.0015667418 0.0007562524 0.0006347262 0.0003724231 0.0001173509 0.0000810636 -0.0047353371 -0.0024693418 -0.0014673314 0.0002338880 0.0001856303 0.0000479941 0.0000334126 -0.0000019335 -0.0000982638 0.0000175182 -0.0000003381 -0.0000267391 -0.0043774782 -0.0022596268 0.0037585396 -0.0005313594 -0.0004987199 -0.0005135952 0.0000933425 0.0000508285 -0.0000571201 0.0003363761 0.0002828726 0.0001101121 0.0495939549 0.0255297274 -0.0420286789 0.0061046059 0.0050001502 0.0030404989 -0.0008142025 -0.0004116046 0.0007149673 -0.0000050423 0.0001459314 0.0006212308 0.0002396108 0.0002933427 0.0007935774 -0.0036849972 -0.0045824330 -0.0124972368 -0.0011293414 0.0002946633 -0.0013896233 -0.0000520856 0.0000584863 0.0000129339 0.0000231671 -0.0000349211 -0.0000742847 0.0000215948 0.0000313056 0.0000304923 -0.0000177793 0.0000018019 -0.0000036956 0.0000126327 -0.0000060324 -0.0000036868 -0.0000036495 0.0000167213 0.0000480669 0.0000016926 0.0000008313 -0.0000050256 -0.0000145210 -0.0000027611 0.0000079305 0.0000026930 -0.0000047150 -0.0000110960 -0.0003502857 0.0001331229 0.0000384992 0.0000455484 -0.0000395494 -0.0000168081 0.0002091239 -0.0000026583 0.0000290023 0.0004249614 -0.0004404884 -0.0002899491 -0.0000069937 0.0001424136 -0.0002962895 -0.0002443419 0.0000374742 0.0000656037 0.0000070284 0.0000204599 0.0000044543 0.0000896211 -0.0000137347 0.0000138008 -0.0000124368 -0.0000278296 0.0000556722 -0.0000231946 0.0000405386 0.0000110274 0.0000177022 0.0000041243 0.0000676317 -0.0000064478 0.0000039823 0.0000058402 -0.0000119157 0.0000026456 0.0000266474 0.0000110323 0.0000058166 -0.0000017555 -0.0000768555 -0.0000763636 -0.0000712169 0.0000223051 0.0000230534 0.0000242918 0.0003308081 -0.0002241688 -0.0006671308 -0.0003631398 -0.0003758135 -0.0003641963 -0.0000271012 -0.0000045296 0.0000095383 0.0008068456 0.0008511281 0.0008811632 -0.0000110591 -0.0000090491 -0.0000222577 -0.0034987774 0.0026108756 0.0074595158 0.0037231225 0.0042190652 0.0042624839 -0.0043443088 -0.0001173328 -0.0070667889 0.0100605591 -0.0170183272 -0.0187979612 0.0020045237 -0.0021674753 -0.0013295721 0.0368495013 0.0069781997 0.0669656270 -0.0153201674 0.0237486682 0.0226135147 0.0384446848 0.0065273763 0.0753956842 -0.1149828876 0.1896775106 0.2077725760 0.0004563442 0.0000247641 0.0007387386 -0.4050599209 -0.0836961692 -0.7510568603 0.1388014791 -0.2500934841 -0.2635742145 0.0000036353 0.0000044260 0.0000085915 0.0000059876 0.0000030710 0.0000086429 0.0000880917 -0.0002744113 -0.0004876533 -0.0000793897 0.0000889980 0.0001099785 -0.0000009714 0.0000020850 0.0000009710 0.0000012651 -0.0000042503 -0.0000013222 -0.0000052817 -0.0000205121 0.0000006337 0.0000120692 -0.0000131169 -0.0000082181 0.0000497124 0.0002121833 -0.0000074686 -0.0001466242 0.0001506528 0.0000964262 0.0000048557 0.0000335431 0.0000007868 0.0000224959 0.0000074994 -0.0000127178 -0.0000725246 -0.0003469332 0.0000190501 -0.0002537168 -0.0000957784 0.0001392311 0.0000128966 0.0000059273 0.0000062326 0.0000013159 0.0000153518 0.0000027196 0.0000079185 0.0000991312 -0.0000056840 -0.0000045323 0.0000032401 -0.0000027601 -0.0001157240 -0.0011386953 0.0000028796 0.0000459374 -0.0000381409 0.0000323384 -0.0000022923 -0.0000257288 0.0000001056 -0.0000142719 -0.0000095251 -0.0000079043 0.0000214204 0.0002157881 0.0000052289 0.0001626557 0.0000735587 0.0000861929 -0.0000050312 -0.0000072147 0.0000016836 0.0001301998 0.0000789155 -0.0000138006 0.0000285859 -0.0000216138 0.0000404107 0.0000072437 -0.0000327311 -0.0000215230 -0.0000955773 -0.0001114157 -0.0001633999 -0.0001579393 0.0000667086 -0.0001979622 0.0013150113 0.0012332702 0.0024986467 0.0000345361 -0.0002183077 -0.0001172358 0.0000349990 0.0000435452 0.0000260551 -0.0003952209 -0.0017947312 -0.0000384922 0.0000415787 0.0001672903 -0.0000134536 -0.0000186830 0.0000093670 0.0000082142 0.0000700722 -0.0000256289 -0.0000420918 0.0000072515 0.0000032416 0.0000037759 0.0000019706 -0.0000014960 -0.0000014530 -0.0000003425 -0.0000018051 -0.0000000705 -0.0000005674 0.0000000524 -0.0000002475 -0.0000009429 0.0000248168 -0.0000001068 -0.0000084763 -0.0000056438 0.0000040710 -0.0000281063 -0.0000155651 0.0000398370 0.0000055155 0.0000029949 -0.0000085780 -0.0000015898 -0.0000015748 0.0000012069 -0.0000016453 0.0000008931 -0.0000032743 -0.0001414906 -0.0001319673 0.0000644094 0.0000107705 0.0003361391 0.0005638208 -0.0000606919 -0.0000482862 -0.0000293635 0.0000773531 -0.0001249346 0.0001262339 0.0000636972 0.0000718215 0.0000133759 -0.0003071240 -0.0004424011 -0.0000983984 -0.0001887079 -0.0001849495 0.0005868211 0.0000692275 0.0000038289 -0.0001289339 -0.0003069643 -0.0000914229 0.0004236615 0.0039905018 0.0048537209 0.0005001924 0.0039949845 0.0003977694 -0.0041222069 -0.0000222198 0.0000837782 0.0000482455 0.0000437394 0.0000581273 0.0000099703 -0.0005528287 -0.0003268982 -0.0001705798 -0.0000200480 -0.0000213450 -0.0000078207 -0.0000067196 0.0000067670 0.0000498375 0.0000141728 0.0000118367 0.0000045290 0.0003687515 0.0001848449 -0.0003130899 0.0000261814 0.0000207700 0.0000272830 -0.0000313655 -0.0000139687 0.0000260781 -0.0001951286 -0.0001551665 -0.0000782005 -0.0041725899 -0.0021356210 0.0035128805 -0.0002473629 -0.0001757772 -0.0001151606 0.0003518983 0.0001679701 -0.0002933179 -0.0000054586 -0.0001426933 -0.0005224860 -0.0000002441 0.0000050838 0.0000205022 -0.0000386445 0.0000187181 -0.0002137643 0.0000000574 0.0000000686 -0.0000014551 0.0000015888 -0.0000019951 0.0000016536 -0.0000037442 0.0000015037 0.0000042329 -0.0000002544 -0.0000030096 -0.0000020658 -0.0000004551 0.0000009109 0.0000002034 -0.0000011478 0.0000029441 0.0000029580 0.0000079705 -0.0000073106 -0.0000071999 0.0000035418 0.0000011869 0.0000020027 0.0000031505 0.0000004036 -0.0000011817 -0.0000010193 0.0000039620 0.0000019787 0.0000324245 -0.0000155389 -0.0000335982 -0.0000027810 -0.0000302578 -0.0000041475 -0.0000192684 -0.0000059037 -0.0000099587 -0.0001048511 0.0000849271 0.0000609537 -0.0000036608 -0.0000108060 0.0000231545 0.0000057652 0.0000230149 -0.0000041358 -0.0000085925 -0.0000273055 -0.0000087256 -0.0000367438 -0.0000034006 -0.0000172641 -0.0000028053 0.0000037290 -0.0000106174 0.0000127333 -0.0000447565 0.0000015837 -0.0000094571 -0.0000001271 -0.0000179895 -0.0000084506 -0.0000115865 -0.0000026351 -0.0007745976 -0.0005581067 -0.0002187491 -0.0088131272 0.0024131077 0.0126720248 0.0474839838 0.0497010645 0.0531310379 0.0018420435 -0.0011209550 -0.0033846052 0.0022404128 -0.0019929695 -0.0053245884 -0.0039270255 -0.0043721925 -0.0044301223 0.0591392343 -0.0409829141 -0.1335749506 -0.5389464458 -0.5525227974 -0.6021375613 0.0005111073 0.0004895707 0.0009335674 -0.0259362334 0.0198474584 0.0561736061 0.0420686272 0.0481503700 0.0483540835 0.0000057911 0.0000003306 0.0000102964 -0.0000078186 0.0000117408 0.0000119312 0.0000006395 -0.0000023656 -0.0000034118 0.0000348125 0.0000069991 0.0000645117 -0.0000092192 0.0000125328 0.0000107922 -0.0000613389 -0.0000067755 -0.0001183501 0.0000757008 -0.0001270002 -0.0001431783 -0.0000006649 0.0000007041 0.0000008767 -0.0003956403 -0.0000791668 -0.0007307598 0.0000702718 -0.0001211276 -0.0001352653 -0.0001531454 -0.0000619216 -0.0000211206 0.0001409195 -0.0002132345 -0.0006056153 0.0000002986 -0.0000007958 -0.0000003100 -0.0000002226 -0.0000003153 -0.0000003707 -0.0000003995 -0.0000075747 -0.0000047635 0.0000040713 -0.0000066092 -0.0000037550 0.0000007270 0.0000126175 0.0000006065 -0.0000033410 0.0000069867 0.0000035518 -0.0000148253 -0.0000885760 -0.0000059294 0.0000598290 -0.0000496393 -0.0000347449 -0.0000042580 -0.0000119664 0.0000028520 0.0000014610 -0.0000015288 -0.0000010672 0.0000301308 0.0001246483 -0.0000113087 0.0000039915 0.0000046693 -0.0000014633 -0.0000022844 0.0000035529 -0.0000014682 0.0000000970 0.0000002710 0.0000003276 -0.0000112236 -0.0000843786 0.0000005560 0.0000202616 -0.0000121735 0.0000131209 0.0001104123 0.0009703067 0.0000012461 -0.0001949293 0.0001666709 -0.0001260978 -0.0000005985 -0.0000033962 -0.0000000827 0.0000025739 0.0000032685 0.0000014618 0.0000028667 0.0000530748 0.0000005992 -0.0000355361 -0.0000123256 -0.0000173691 -0.0000080951 -0.0000016858 0.0000014919 0.0000666416 0.0000366922 -0.0000326550 0.0000239031 -0.0000484024 0.0000171349 0.0000006198 -0.0000000116 -0.0000530854 -0.0000006505 0.0000131461 0.0000155649 0.0000020020 -0.0000015146 -0.0000045707 -0.0000920167 -0.0000795560 -0.0001470841 0.0000897318 -0.0000886579 -0.0000417759 0.0000906840 -0.0001264220 -0.0000890817 -0.0010307829 -0.0060163851 -0.0002984475 0.0000130878 0.0004846806 0.0000621679 0.0001817120 -0.0000924193 -0.0001187750 -0.0009761157 0.0009428370 0.0004949361 -0.0010480142 -0.0003872584 -0.0006318044 0.0002132141 0.0000138182 0.0001241475 -0.0000975588 -0.0002855441 -0.0000456546 0.0002044998 0.0000928691 0.0000888497 0.0006330204 0.0040882869 0.0004252853 0.0018353222 0.0010260069 0.0001771751 0.0014730098 -0.0006823899 0.0006502590 -0.0025123984 -0.0019753683 -0.0016977317 0.0000696356 0.0010868701 0.0009049326 0.0019380990 0.0024103035 0.0017643134 0.6084927712 0.2758289463 0.2280330623 0.0002723370 0.0098718974 0.0140564909 -0.0001582516 -0.0009524925 -0.0011518183 0.0016749277 0.0009008087 -0.0000019076 0.0011481502 0.0011636047 -0.0004725963 -0.0005830145 -0.0007438629 -0.0001740108 -0.0008073953 0.0001752368 0.0015452956 -0.0010115962 -0.0010995183 0.0003815801 -0.0075021293 -0.0033281886 0.0083813630 0.0080115012 0.0103717176 0.0008758158 0.0096185755 0.0026989833 -0.0118185478 -0.0455140609 -0.0216404404 -0.0179772335 -0.0102572526 -0.0034103681 -0.0021212847 0.1196459593 0.0610059557 0.0341070747 0.0018069117 0.0013465593 0.0004981169 0.0003365124 0.0000523976 -0.0006075602 -0.0000026132 -0.0000357589 -0.0001078473 -0.0345452143 -0.0176790739 0.0298067184 -0.0028686777 -0.0027673820 -0.0032192047 0.0002534792 0.0001502909 -0.0002528620 0.0018512839 0.0010512700 0.0009355155 0.4012522287 0.2011875471 -0.3383866759 0.0314800124 0.0254145347 0.0149221834 -0.0025285045 -0.0013991708 0.0019379380 -0.0001479125 0.0004716702 0.0028456864 -0.0069279424 -0.0082715241 -0.0225671280 0.1064784059 0.1276645956 0.3577585315 0.0000677217 -0.0001094430 0.0000938919 0.0014037651 -0.0015963318 -0.0006075019 -0.0012492662 0.0008683895 0.0020821979 -0.0003234752 -0.0010126088 -0.0007892850 0.0002221520 0.0003780395 0.0001071903 0.0000762015 -0.0000963284 0.0000280668 -0.0014567486 0.0010343603 0.0011762259 0.0000170850 -0.0000190671 -0.0000228592 0.0006958508 0.0001500305 -0.0003015552 -0.0003733751 0.0002190258 0.0003787055 0.0000860348 0.0005970653 0.0003445005 0.0002921133 -0.0006880014 0.0002399903 -0.0020586685 -0.0000475510 -0.0011152725 0.0181135149 -0.0133894105 -0.0102738609 0.0002478451 0.0017743575 -0.0045531485 -0.0013303709 -0.0032102226 -0.0001518487 0.0000775433 -0.0012132094 -0.0004843871 -0.0011801191 0.0002868901 -0.0001774645 0.0000480517 0.0000326407 0.0003728945 0.0013185754 -0.0033968940 0.0000137514 -0.0006853298 0.0001076652 -0.0022987576 0.0021832252 0.0014339902 -0.0001744941 0.0001201201 0.0001604165 -0.0001170252 -0.0000345932 -0.0001237901 -0.0001406724 0.0003791151 0.0003193212 0.0001452157 -0.0002355221 -0.0000365919 0.0000743382 -0.0000574454 0.0001083182 0.0002651074 0.0005306999 0.0005769295 0.0006535744 -0.0004887472 0.0010248126 0.0025776425 -0.0027157484 -0.0034421254 -0.0026956886 0.0004463819 0.0001106657 0.0002000200 0.0014500173 -0.0011056292 -0.0027511926 -0.0062380214 -0.0069779765 -0.0079495091 0.0000774079 0.0000622410 0.0002352509 -0.0000113969 0.0000869686 0.0001542815 -0.0001439666 0.0000994246 0.0000047800 -0.0004302629 -0.0001099072 -0.0008632416 0.0004840979 -0.0008862148 -0.0009908396 -0.0014244358 -0.0004995883 -0.0029097220 0.0007429237 -0.0010746956 -0.0011781237 0.0002928373 -0.0001433273 0.0000594303 0.0052786373 0.0010473404 0.0095767497 -0.0056283091 0.0098632600 0.0113559463 -0.0001014063 -0.0000125104 -0.0000456136 -0.0002355525 -0.0000446182 -0.0001730336 -0.0001158037 0.0000276457 -0.0000750937 -0.0001145963 0.0000534665 0.0000338955 0.0000330458 -0.0000608222 -0.0000279674 -0.0000650256 0.0000820505 0.0000477526 0.0001143401 0.0004855325 -0.0000110707 -0.0002407434 0.0002477718 0.0001571295 -0.0011662961 -0.0051731757 0.0001362139 0.0029130165 -0.0030133034 -0.0019508664 -0.0000059635 -0.0002754840 -0.0000207105 -0.0003208058 -0.0001273048 0.0001811502 0.0003714547 0.0025771879 0.0000073418 0.0036375408 0.0013675568 -0.0020195978 -0.0000715976 -0.0000670036 -0.0000367322 0.0000359515 0.0000397611 0.0000195832 0.0000900754 0.0003331534 0.0000220736 -0.0002709230 0.0002211303 -0.0001796664 -0.0005386472 -0.0033777589 -0.0000210843 0.0030300527 -0.0025025914 0.0019665050 -0.0000293629 -0.0003866711 -0.0000014401 -0.0002571342 -0.0001327873 -0.0001363182 0.0003712323 0.0040599326 0.0000192648 0.0031250739 0.0015989859 0.0016751526 0.0000491393 0.0002137147 -0.0003730808 -0.0018970396 -0.0009528700 0.0003122075 0.0009904653 -0.0021035855 0.0019596505 -0.0017774573 0.0025129261 0.0016487954 0.0007558224 -0.0010945362 -0.0009400801 -0.0004618807 -0.0009284932 0.0004608840 0.0053203279 0.0000694786 0.0038710146 -0.0116888276 0.0153872521 0.0091308048</array>
                  </module>
                  <molecule cmlx:templateRef="atom" id="molecule-rot">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.50896775" y3="-2.76662743" z3="0.61164184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.17457459" y3="-4.71676249" z3="0.03689906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.41288461" y3="-3.64912972" z3="0.06698996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.05536619" y3="-0.90428489" z3="0.13970889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.86619596" y3="-1.38694458" z3="0.65869666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="3.3315333" y3="1.413338" z3="-0.30057804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.30168981" y3="0.56475473" z3="0.20289034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="4.55609348" y3="3.37190899" z3="0.36067125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="3.42091126" y3="2.83178296" z3="-0.19627633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="4.65648129" y3="4.45907068" z3="0.43681259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21219011" y3="0.88060988" z3="-0.87139672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.97158534" y3="-0.5053516" z3="1.19336105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.02014169" y3="0.33533283" z3="0.13364161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.34698504" y3="1.43054047" z3="0.87573762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.23910269" y3="-0.66277565" z3="-0.69184648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-1.27418716" y3="-1.47642954" z3="-0.5497411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-2.1316301" y3="-4.94440384" z3="-5.21088355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-2.13043857" y3="-4.32631121" z3="-4.30852795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-2.11904238" y3="-2.71435253" z3="-2.02198751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="-1.25043372" y3="-3.25655308" z3="-4.21001391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-2.99516903" y3="-4.62032001" z3="-3.25133558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-2.97377462" y3="-3.82043789" z3="-2.11571002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="-1.21625661" y3="-2.43364449" z3="-3.07293319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="-0.55722194" y3="-3.01316637" z3="-5.01895519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-3.67271144" y3="-5.47628168" z3="-3.30321903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-3.61459409" y3="-4.06300012" z3="-1.26373599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-2.16878712" y3="-1.88862977" z3="-0.86980045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-3.30026261" y3="-1.50370476" z3="-0.26902962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-4.19621446" y3="-2.05967566" z3="-0.5574466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-3.26118294" y3="-1.07927799" z3="1.14830997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.2289431" y3="-0.3674973" z3="3.85552688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-4.26179325" y3="-1.54055713" z3="2.01256724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.2570139" y3="-0.24431271" z3="1.6477539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.23927001" y3="0.10676996" z3="2.99321242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.24021365" y3="-1.19257944" z3="3.36193982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-5.03891404" y3="-2.21264962" z3="1.63691453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.48065997" y3="0.16416855" z3="0.99976727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-1.43436069" y3="0.75325716" z3="3.35330994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-5.00630081" y3="-1.58832692" z3="4.03396939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-3.20973954" y3="-0.10132724" z3="4.91639482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="-0.36521908" y3="-1.40268598" z3="-3.09107307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="-0.08097643" y3="-1.07586973" z3="-2.19161989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="2.25227334" y3="3.67076647" z3="-0.56627343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.9671297" y3="0.20889568" z3="-1.40471437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-4.77535893" y3="0.73031492" z3="-0.38985166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-4.42313426" y3="1.62081624" z3="0.47863679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.94231759" y3="3.29545215" z3="0.57971399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.12091039" y3="4.02128187" z3="-1.12961387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.2470738" y3="3.38500421" z3="1.32573158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21477538" y3="4.01843172" z3="1.74580463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-5.96219723" y3="0.17301998" z3="-0.19744006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-6.76624833" y3="0.61035741" z3="0.88768197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.32845481" y3="3.69390769" z3="-1.82057183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-4.05916169" y3="5.12286447" z3="-1.06648117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.09772732" y3="3.7615163" z3="-1.57613852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.46004301" y3="2.79893099" z3="0.81674344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.27677421" y3="3.04205677" z3="2.37465995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-1.93852894" y3="4.44687539" z3="1.32460721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.95737795" y3="5.0677839" z3="1.97778729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.22973167" y3="4.01142801" z3="1.31093403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-5.23967632" y3="3.4587814" z3="2.69762326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-7.0737236" y3="1.65936869" z3="0.74552246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-6.22762884" y3="0.50715437" z3="1.84238242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-7.65098176" y3="-0.04008062" z3="0.8771684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.16296744" y3="-3.21371832" z3="1.05597483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.40655667" y3="-4.04425316" z3="0.21649471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-0.87980218" y3="-4.43688061" z3="0.56642888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.40456283" y3="-3.99601284" z3="1.77539935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="-0.67249875" y3="-3.19490275" z3="2.64673535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="0.60717304" y3="-2.80045464" z3="2.2772236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.81315572" y3="-4.3498144" z3="-0.75104255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-1.48108011" y3="-5.05429772" z3="-0.10153588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.78138487" y3="-4.34739669" z3="2.12569269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-1.12078937" y3="-2.86664007" z3="3.58561765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="1.17777381" y3="-2.14634378" z3="2.93801795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="1.74215733" y3="4.57291855" z3="0.37703115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="0.59128896" y3="5.30539005" z3="0.11793525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.04645877" y3="5.13075531" z3="-1.10537294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="0.45219044" y3="4.26877618" z3="-2.07892534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="1.59982069" y3="3.53750923" z3="-1.80053325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="2.22935631" y3="4.66325227" z3="1.35093035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="0.17261747" y3="5.98838849" z3="0.8577343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-1.29526256" y3="5.85133116" z3="-1.36539824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.06792079" y3="4.16790669" z3="-3.03223866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.98358356" y3="2.83714025" z3="-2.54414238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="-3.10160272" y3="-4.29851577" z3="3.29192589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="-3.53430876" y3="-4.6539126" z3="1.21930388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-1.73610913" y3="5.83704602" z3="-2.49436628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-1.83289153" y3="6.41112474" z3="-0.42825919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="4.64169477" y3="-3.21127736" z3="-0.49112546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="4.95731818" y3="-1.8215563" z3="-0.49207029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="5.54221793" y3="-4.13298063" z3="-1.09321948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="6.6933401" y3="-3.69867031" z3="-1.70216492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="5.2927756" y3="-5.19833923" z3="-1.07325111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="7.37619" y3="-4.41534616" z3="-2.16682355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.14195216" y3="-1.40158056" z3="-1.15965432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="6.98595421" y3="-2.31422008" z3="-1.74556161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.37614553" y3="-0.33638284" z3="-1.2117064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88879788" y3="-1.96677593" z3="-2.25573465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="5.45030251" y3="1.13442065" z3="0.845221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="5.59153462" y3="2.55266377" z3="0.88078216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="6.44415447" y3="0.3452163" z3="1.48989327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="7.53776303" y3="0.92844639" z3="2.08351284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.32948218" y3="-0.74009017" z3="1.51677791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="8.28672829" y3="0.29991736" z3="2.57356183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="6.74168324" y3="3.12613443" z3="1.4902176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="7.69990854" y3="2.33469981" z3="2.07319546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="6.84265868" y3="4.21580602" z3="1.49661593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="8.5782377" y3="2.78629583" z3="2.54270077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.64862121" y3="-0.49558426" z3="-2.5610054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-5.503189" y3="-1.109936" z3="-2.2386999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.02268833" y3="0.24524591" z3="-3.29279565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-3.93318116" y3="-1.14476709" z3="-3.0902907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.68295151" y3="0.91070501" z3="-1.75521744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.84872872" y3="1.66570576" z3="-2.54498877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-2.2022044" y3="1.4006645" z3="-0.89398472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-1.9565535" y3="0.18901822" z3="-2.16194543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:2.509,-2.7666,.6116;3.1746,-4.7168,.0369;3.4129,-3.6491,.067;4.0554,-.9043,.1397;2.8662,-1.3869,.6587;3.3315,1.4133,-.3006;4.3017,.5648,.2029;4.5561,3.3719,.3607;3.4209,2.8318,-.1963;4.6565,4.4591,.4368;2.2122,.8806,-.8714;1.9716,-.5054,1.1934;1.0201,.3353,.1336;.347,1.4305,.8757;.2391,-.6628,-.6918;-1.2742,-1.4764,-.5497;-2.1316,-4.9444,-5.2109;-2.1304,-4.3263,-4.3085;-2.119,-2.7144,-2.022;-1.2504,-3.2566,-4.21;-2.9952,-4.6203,-3.2513;-2.9738,-3.8204,-2.1157;-1.2163,-2.4336,-3.0729;-.5572,-3.0132,-5.019;-3.6727,-5.4763,-3.3032;-3.6146,-4.063,-1.2637;-2.1688,-1.8886,-.8698;-3.3003,-1.5037,-.269;-4.1962,-2.0597,-.5574;-3.2612,-1.0793,1.1483;-3.2289,-.3675,3.8555;-4.2618,-1.5406,2.0126;-2.257,-.2443,1.6478;-2.2393,.1068,2.9932;-4.2402,-1.1926,3.3619;-5.0389,-2.2126,1.6369;-1.4807,.1642,.9998;-1.4344,.7533,3.3533;-5.0063,-1.5883,4.034;-3.2097,-.1013,4.9164;-.3652,-1.4027,-3.0911;-.081,-1.0759,-2.1916;2.2523,3.6708,-.5663;-3.9671,.2089,-1.4047;-4.7754,.7303,-.3899;-4.4231,1.6208,.4786;-3.9423,3.2955,.5797;-4.1209,4.0213,-1.1296;-2.2471,3.385,1.3257;-5.2148,4.0184,1.7458;-5.9622,.173,-.1974;-6.7662,.6104,.8877;-3.3285,3.6939,-1.8206;-4.0592,5.1229,-1.0665;-5.0977,3.7615,-1.5761;-1.46,2.7989,.8167;-2.2768,3.0421,2.3747;-1.9385,4.4469,1.3246;-4.9574,5.0678,1.9778;-6.2297,4.0114,1.3109;-5.2397,3.4588,2.6976;-7.0737,1.6594,.7455;-6.2276,.5072,1.8424;-7.651,-.0401,.8772;1.163,-3.2137,1.056;.4066,-4.0443,.2165;-.8798,-4.4369,.5664;-1.4046,-3.996,1.7754;-.6725,-3.1949,2.6467;.6072,-2.8005,2.2772;.8132,-4.3498,-.751;-1.4811,-5.0543,-.1015;-2.7814,-4.3474,2.1257;-1.1208,-2.8666,3.5856;1.1778,-2.1463,2.938;1.7422,4.5729,.377;.5913,5.3054,.1179;-.0465,5.1308,-1.1054;.4522,4.2688,-2.0789;1.5998,3.5375,-1.8005;2.2294,4.6633,1.3509;.1726,5.9884,.8577;-1.2953,5.8513,-1.3654;-.0679,4.1679,-3.0322;1.9836,2.8371,-2.5441;-3.1016,-4.2985,3.2919;-3.5343,-4.6539,1.2193;-1.7361,5.837,-2.4944;-1.8329,6.4111,-.4283;4.6417,-3.2113,-.4911;4.9573,-1.8216,-.4921;5.5422,-4.133,-1.0932;6.6933,-3.6987,-1.7022;5.2928,-5.1983,-1.0733;7.3762,-4.4153,-2.1668;6.142,-1.4016,-1.1597;6.986,-2.3142,-1.7456;6.3761,-.3364,-1.2117;7.8888,-1.9668,-2.2557;5.4503,1.1344,.8452;5.5915,2.5527,.8808;6.4442,.3452,1.4899;7.5378,.9284,2.0835;6.3295,-.7401,1.5168;8.2867,.2999,2.5736;6.7417,3.1261,1.4902;7.6999,2.3347,2.0732;6.8427,4.2158,1.4966;8.5782,2.7863,2.5427;-4.6486,-.4956,-2.561;-5.5032,-1.1099,-2.2387;-5.0227,.2452,-3.2928;-3.9332,-1.1448,-3.0903;-2.683,.9107,-1.7552;-2.8487,1.6657,-2.545;-2.2022,1.4007,-.894;-1.9566,.189,-2.1619;</scalar>
</formula>
</molecule>
                  <molecule cmlx:templateRef="atom" id="molecule-rot">
                     <atomArray>
                        <atom elementType="C" id="a1" x3="2.50896775" y3="-2.76662743" z3="0.61164184">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a2" x3="3.17457459" y3="-4.71676249" z3="0.03689906">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a3" x3="3.41288461" y3="-3.64912972" z3="0.06698996">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a4" x3="4.05536619" y3="-0.90428489" z3="0.13970889">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a5" x3="2.86619596" y3="-1.38694458" z3="0.65869666">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a6" x3="3.3315333" y3="1.413338" z3="-0.30057804">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a7" x3="4.30168981" y3="0.56475473" z3="0.20289034">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a8" x3="4.55609348" y3="3.37190899" z3="0.36067125">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a9" x3="3.42091126" y3="2.83178296" z3="-0.19627633">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a10" x3="4.65648129" y3="4.45907068" z3="0.43681259">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a11" x3="2.21219011" y3="0.88060988" z3="-0.87139672">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a12" x3="1.97158534" y3="-0.5053516" z3="1.19336105">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="P" id="a13" x3="1.02014169" y3="0.33533283" z3="0.13364161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                        </atom>
                        <atom elementType="O" id="a14" x3="0.34698504" y3="1.43054047" z3="0.87573762">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a15" x3="0.23910269" y3="-0.66277565" z3="-0.69184648">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a16" x3="-1.27418716" y3="-1.47642954" z3="-0.5497411">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a17" x3="-2.1316301" y3="-4.94440384" z3="-5.21088355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a18" x3="-2.13043857" y3="-4.32631121" z3="-4.30852795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a19" x3="-2.11904238" y3="-2.71435253" z3="-2.02198751">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a20" x3="-1.25043372" y3="-3.25655308" z3="-4.21001391">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a21" x3="-2.99516903" y3="-4.62032001" z3="-3.25133558">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a22" x3="-2.97377462" y3="-3.82043789" z3="-2.11571002">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a23" x3="-1.21625661" y3="-2.43364449" z3="-3.07293319">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a24" x3="-0.55722194" y3="-3.01316637" z3="-5.01895519">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a25" x3="-3.67271144" y3="-5.47628168" z3="-3.30321903">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a26" x3="-3.61459409" y3="-4.06300012" z3="-1.26373599">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a27" x3="-2.16878712" y3="-1.88862977" z3="-0.86980045">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="C" id="a28" x3="-3.30026261" y3="-1.50370476" z3="-0.26902962">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a29" x3="-4.19621446" y3="-2.05967566" z3="-0.5574466">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a30" x3="-3.26118294" y3="-1.07927799" z3="1.14830997">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a31" x3="-3.2289431" y3="-0.3674973" z3="3.85552688">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a32" x3="-4.26179325" y3="-1.54055713" z3="2.01256724">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a33" x3="-2.2570139" y3="-0.24431271" z3="1.6477539">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a34" x3="-2.23927001" y3="0.10676996" z3="2.99321242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a35" x3="-4.24021365" y3="-1.19257944" z3="3.36193982">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a36" x3="-5.03891404" y3="-2.21264962" z3="1.63691453">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a37" x3="-1.48065997" y3="0.16416855" z3="0.99976727">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a38" x3="-1.43436069" y3="0.75325716" z3="3.35330994">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a39" x3="-5.00630081" y3="-1.58832692" z3="4.03396939">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a40" x3="-3.20973954" y3="-0.10132724" z3="4.91639482">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a41" x3="-0.36521908" y3="-1.40268598" z3="-3.09107307">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="H" id="a42" x3="-0.08097643" y3="-1.07586973" z3="-2.19161989">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a43" x3="2.25227334" y3="3.67076647" z3="-0.56627343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a44" x3="-3.9671297" y3="0.20889568" z3="-1.40471437">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a45" x3="-4.77535893" y3="0.73031492" z3="-0.38985166">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a46" x3="-4.42313426" y3="1.62081624" z3="0.47863679">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="Si" id="a47" x3="-3.94231759" y3="3.29545215" z3="0.57971399">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                        </atom>
                        <atom elementType="C" id="a48" x3="-4.12091039" y3="4.02128187" z3="-1.12961387">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a49" x3="-2.2470738" y3="3.38500421" z3="1.32573158">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a50" x3="-5.21477538" y3="4.01843172" z3="1.74580463">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="O" id="a51" x3="-5.96219723" y3="0.17301998" z3="-0.19744006">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a52" x3="-6.76624833" y3="0.61035741" z3="0.88768197">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a53" x3="-3.32845481" y3="3.69390769" z3="-1.82057183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a54" x3="-4.05916169" y3="5.12286447" z3="-1.06648117">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a55" x3="-5.09772732" y3="3.7615163" z3="-1.57613852">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a56" x3="-1.46004301" y3="2.79893099" z3="0.81674344">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a57" x3="-2.27677421" y3="3.04205677" z3="2.37465995">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a58" x3="-1.93852894" y3="4.44687539" z3="1.32460721">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a59" x3="-4.95737795" y3="5.0677839" z3="1.97778729">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a60" x3="-6.22973167" y3="4.01142801" z3="1.31093403">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a61" x3="-5.23967632" y3="3.4587814" z3="2.69762326">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a62" x3="-7.0737236" y3="1.65936869" z3="0.74552246">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a63" x3="-6.22762884" y3="0.50715437" z3="1.84238242">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a64" x3="-7.65098176" y3="-0.04008062" z3="0.8771684">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a65" x3="1.16296744" y3="-3.21371832" z3="1.05597483">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a66" x3="0.40655667" y3="-4.04425316" z3="0.21649471">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a67" x3="-0.87980218" y3="-4.43688061" z3="0.56642888">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a68" x3="-1.40456283" y3="-3.99601284" z3="1.77539935">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a69" x3="-0.67249875" y3="-3.19490275" z3="2.64673535">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a70" x3="0.60717304" y3="-2.80045464" z3="2.2772236">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a71" x3="0.81315572" y3="-4.3498144" z3="-0.75104255">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a72" x3="-1.48108011" y3="-5.05429772" z3="-0.10153588">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a73" x3="-2.78138487" y3="-4.34739669" z3="2.12569269">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a74" x3="-1.12078937" y3="-2.86664007" z3="3.58561765">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a75" x3="1.17777381" y3="-2.14634378" z3="2.93801795">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a76" x3="1.74215733" y3="4.57291855" z3="0.37703115">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a77" x3="0.59128896" y3="5.30539005" z3="0.11793525">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a78" x3="-0.04645877" y3="5.13075531" z3="-1.10537294">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a79" x3="0.45219044" y3="4.26877618" z3="-2.07892534">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a80" x3="1.59982069" y3="3.53750923" z3="-1.80053325">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a81" x3="2.22935631" y3="4.66325227" z3="1.35093035">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a82" x3="0.17261747" y3="5.98838849" z3="0.8577343">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="N" id="a83" x3="-1.29526256" y3="5.85133116" z3="-1.36539824">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                        </atom>
                        <atom elementType="H" id="a84" x3="-0.06792079" y3="4.16790669" z3="-3.03223866">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a85" x3="1.98358356" y3="2.83714025" z3="-2.54414238">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="O" id="a86" x3="-3.10160272" y3="-4.29851577" z3="3.29192589">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a87" x3="-3.53430876" y3="-4.6539126" z3="1.21930388">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a88" x3="-1.73610913" y3="5.83704602" z3="-2.49436628">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="O" id="a89" x3="-1.83289153" y3="6.41112474" z3="-0.42825919">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                        </atom>
                        <atom elementType="C" id="a90" x3="4.64169477" y3="-3.21127736" z3="-0.49112546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a91" x3="4.95731818" y3="-1.8215563" z3="-0.49207029">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a92" x3="5.54221793" y3="-4.13298063" z3="-1.09321948">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a93" x3="6.6933401" y3="-3.69867031" z3="-1.70216492">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a94" x3="5.2927756" y3="-5.19833923" z3="-1.07325111">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a95" x3="7.37619" y3="-4.41534616" z3="-2.16682355">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a96" x3="6.14195216" y3="-1.40158056" z3="-1.15965432">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a97" x3="6.98595421" y3="-2.31422008" z3="-1.74556161">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a98" x3="6.37614553" y3="-0.33638284" z3="-1.2117064">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a99" x3="7.88879788" y3="-1.96677593" z3="-2.25573465">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a100" x3="5.45030251" y3="1.13442065" z3="0.845221">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a101" x3="5.59153462" y3="2.55266377" z3="0.88078216">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a102" x3="6.44415447" y3="0.3452163" z3="1.48989327">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a103" x3="7.53776303" y3="0.92844639" z3="2.08351284">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a104" x3="6.32948218" y3="-0.74009017" z3="1.51677791">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a105" x3="8.28672829" y3="0.29991736" z3="2.57356183">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a106" x3="6.74168324" y3="3.12613443" z3="1.4902176">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="C" id="a107" x3="7.69990854" y3="2.33469981" z3="2.07319546">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a108" x3="6.84265868" y3="4.21580602" z3="1.49661593">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a109" x3="8.5782377" y3="2.78629583" z3="2.54270077">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a110" x3="-4.64862121" y3="-0.49558426" z3="-2.5610054">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a111" x3="-5.503189" y3="-1.109936" z3="-2.2386999">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a112" x3="-5.02268833" y3="0.24524591" z3="-3.29279565">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a113" x3="-3.93318116" y3="-1.14476709" z3="-3.0902907">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="C" id="a114" x3="-2.68295151" y3="0.91070501" z3="-1.75521744">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                        </atom>
                        <atom elementType="H" id="a115" x3="-2.84872872" y3="1.66570576" z3="-2.54498877">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a116" x3="-2.2022044" y3="1.4006645" z3="-0.89398472">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                        <atom elementType="H" id="a117" x3="-1.9565535" y3="0.18901822" z3="-2.16194543">
                           <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                        </atom>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a5" order="S"/>
                        <bond atomRefs2="a1 a3" order="S"/>
                        <bond atomRefs2="a1 a65" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a3 a90" order="S"/>
                        <bond atomRefs2="a4 a91" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a4 a7" order="S"/>
                        <bond atomRefs2="a5 a12" order="S"/>
                        <bond atomRefs2="a6 a11" order="S"/>
                        <bond atomRefs2="a6 a9" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a100" order="S"/>
                        <bond atomRefs2="a8 a9" order="S"/>
                        <bond atomRefs2="a8 a10" order="S"/>
                        <bond atomRefs2="a8 a101" order="S"/>
                        <bond atomRefs2="a9 a43" order="S"/>
                        <bond atomRefs2="a11 a13" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a13 a14" order="S"/>
                        <bond atomRefs2="a13 a15" order="S"/>
                        <bond atomRefs2="a16 a27" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a18 a21" order="S"/>
                        <bond atomRefs2="a18 a20" order="S"/>
                        <bond atomRefs2="a19 a22" order="S"/>
                        <bond atomRefs2="a19 a27" order="S"/>
                        <bond atomRefs2="a19 a23" order="S"/>
                        <bond atomRefs2="a20 a23" order="S"/>
                        <bond atomRefs2="a20 a24" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a25" order="S"/>
                        <bond atomRefs2="a22 a26" order="S"/>
                        <bond atomRefs2="a23 a41" order="S"/>
                        <bond atomRefs2="a27 a28" order="S"/>
                        <bond atomRefs2="a28 a29" order="S"/>
                        <bond atomRefs2="a28 a30" order="S"/>
                        <bond atomRefs2="a30 a32" order="S"/>
                        <bond atomRefs2="a30 a33" order="S"/>
                        <bond atomRefs2="a31 a40" order="S"/>
                        <bond atomRefs2="a31 a35" order="S"/>
                        <bond atomRefs2="a31 a34" order="S"/>
                        <bond atomRefs2="a32 a35" order="S"/>
                        <bond atomRefs2="a32 a36" order="S"/>
                        <bond atomRefs2="a33 a34" order="S"/>
                        <bond atomRefs2="a33 a37" order="S"/>
                        <bond atomRefs2="a34 a38" order="S"/>
                        <bond atomRefs2="a35 a39" order="S"/>
                        <bond atomRefs2="a41 a42" order="S"/>
                        <bond atomRefs2="a43 a76" order="S"/>
                        <bond atomRefs2="a43 a80" order="S"/>
                        <bond atomRefs2="a44 a45" order="S"/>
                        <bond atomRefs2="a44 a114" order="S"/>
                        <bond atomRefs2="a44 a110" order="S"/>
                        <bond atomRefs2="a45 a51" order="S"/>
                        <bond atomRefs2="a45 a46" order="S"/>
                        <bond atomRefs2="a46 a47" order="S"/>
                        <bond atomRefs2="a47 a49" order="S"/>
                        <bond atomRefs2="a47 a50" order="S"/>
                        <bond atomRefs2="a47 a48" order="S"/>
                        <bond atomRefs2="a48 a53" order="S"/>
                        <bond atomRefs2="a48 a54" order="S"/>
                        <bond atomRefs2="a48 a55" order="S"/>
                        <bond atomRefs2="a49 a58" order="S"/>
                        <bond atomRefs2="a49 a57" order="S"/>
                        <bond atomRefs2="a49 a56" order="S"/>
                        <bond atomRefs2="a50 a59" order="S"/>
                        <bond atomRefs2="a50 a61" order="S"/>
                        <bond atomRefs2="a50 a60" order="S"/>
                        <bond atomRefs2="a51 a52" order="S"/>
                        <bond atomRefs2="a52 a63" order="S"/>
                        <bond atomRefs2="a52 a62" order="S"/>
                        <bond atomRefs2="a52 a64" order="S"/>
                        <bond atomRefs2="a65 a66" order="S"/>
                        <bond atomRefs2="a65 a70" order="S"/>
                        <bond atomRefs2="a66 a67" order="S"/>
                        <bond atomRefs2="a66 a71" order="S"/>
                        <bond atomRefs2="a67 a72" order="S"/>
                        <bond atomRefs2="a67 a68" order="S"/>
                        <bond atomRefs2="a68 a73" order="S"/>
                        <bond atomRefs2="a68 a69" order="S"/>
                        <bond atomRefs2="a69 a70" order="S"/>
                        <bond atomRefs2="a69 a74" order="S"/>
                        <bond atomRefs2="a70 a75" order="S"/>
                        <bond atomRefs2="a73 a86" order="S"/>
                        <bond atomRefs2="a73 a87" order="S"/>
                        <bond atomRefs2="a76 a81" order="S"/>
                        <bond atomRefs2="a76 a77" order="S"/>
                        <bond atomRefs2="a77 a78" order="S"/>
                        <bond atomRefs2="a77 a82" order="S"/>
                        <bond atomRefs2="a78 a79" order="S"/>
                        <bond atomRefs2="a78 a83" order="S"/>
                        <bond atomRefs2="a79 a84" order="S"/>
                        <bond atomRefs2="a79 a80" order="S"/>
                        <bond atomRefs2="a80 a85" order="S"/>
                        <bond atomRefs2="a83 a88" order="S"/>
                        <bond atomRefs2="a83 a89" order="S"/>
                        <bond atomRefs2="a90 a91" order="S"/>
                        <bond atomRefs2="a90 a92" order="S"/>
                        <bond atomRefs2="a91 a96" order="S"/>
                        <bond atomRefs2="a92 a94" order="S"/>
                        <bond atomRefs2="a92 a93" order="S"/>
                        <bond atomRefs2="a93 a97" order="S"/>
                        <bond atomRefs2="a93 a95" order="S"/>
                        <bond atomRefs2="a96 a97" order="S"/>
                        <bond atomRefs2="a96 a98" order="S"/>
                        <bond atomRefs2="a97 a99" order="S"/>
                        <bond atomRefs2="a100 a102" order="S"/>
                        <bond atomRefs2="a100 a101" order="S"/>
                        <bond atomRefs2="a101 a106" order="S"/>
                        <bond atomRefs2="a102 a103" order="S"/>
                        <bond atomRefs2="a102 a104" order="S"/>
                        <bond atomRefs2="a103 a105" order="S"/>
                        <bond atomRefs2="a103 a107" order="S"/>
                        <bond atomRefs2="a106 a108" order="S"/>
                        <bond atomRefs2="a106 a107" order="S"/>
                        <bond atomRefs2="a107 a109" order="S"/>
                        <bond atomRefs2="a110 a111" order="S"/>
                        <bond atomRefs2="a110 a113" order="S"/>
                        <bond atomRefs2="a110 a112" order="S"/>
                        <bond atomRefs2="a114 a115" order="S"/>
                        <bond atomRefs2="a114 a116" order="S"/>
                        <bond atomRefs2="a114 a117" order="S"/>
                     </bondArray>
                     <formula concise="C53H48N3O11PSi">
                        <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">913.639861000001</scalar>
                     </property>
                  <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:2.509,-2.7666,.6116;3.1746,-4.7168,.0369;3.4129,-3.6491,.067;4.0554,-.9043,.1397;2.8662,-1.3869,.6587;3.3315,1.4133,-.3006;4.3017,.5648,.2029;4.5561,3.3719,.3607;3.4209,2.8318,-.1963;4.6565,4.4591,.4368;2.2122,.8806,-.8714;1.9716,-.5054,1.1934;1.0201,.3353,.1336;.347,1.4305,.8757;.2391,-.6628,-.6918;-1.2742,-1.4764,-.5497;-2.1316,-4.9444,-5.2109;-2.1304,-4.3263,-4.3085;-2.119,-2.7144,-2.022;-1.2504,-3.2566,-4.21;-2.9952,-4.6203,-3.2513;-2.9738,-3.8204,-2.1157;-1.2163,-2.4336,-3.0729;-.5572,-3.0132,-5.019;-3.6727,-5.4763,-3.3032;-3.6146,-4.063,-1.2637;-2.1688,-1.8886,-.8698;-3.3003,-1.5037,-.269;-4.1962,-2.0597,-.5574;-3.2612,-1.0793,1.1483;-3.2289,-.3675,3.8555;-4.2618,-1.5406,2.0126;-2.257,-.2443,1.6478;-2.2393,.1068,2.9932;-4.2402,-1.1926,3.3619;-5.0389,-2.2126,1.6369;-1.4807,.1642,.9998;-1.4344,.7533,3.3533;-5.0063,-1.5883,4.034;-3.2097,-.1013,4.9164;-.3652,-1.4027,-3.0911;-.081,-1.0759,-2.1916;2.2523,3.6708,-.5663;-3.9671,.2089,-1.4047;-4.7754,.7303,-.3899;-4.4231,1.6208,.4786;-3.9423,3.2955,.5797;-4.1209,4.0213,-1.1296;-2.2471,3.385,1.3257;-5.2148,4.0184,1.7458;-5.9622,.173,-.1974;-6.7662,.6104,.8877;-3.3285,3.6939,-1.8206;-4.0592,5.1229,-1.0665;-5.0977,3.7615,-1.5761;-1.46,2.7989,.8167;-2.2768,3.0421,2.3747;-1.9385,4.4469,1.3246;-4.9574,5.0678,1.9778;-6.2297,4.0114,1.3109;-5.2397,3.4588,2.6976;-7.0737,1.6594,.7455;-6.2276,.5072,1.8424;-7.651,-.0401,.8772;1.163,-3.2137,1.056;.4066,-4.0443,.2165;-.8798,-4.4369,.5664;-1.4046,-3.996,1.7754;-.6725,-3.1949,2.6467;.6072,-2.8005,2.2772;.8132,-4.3498,-.751;-1.4811,-5.0543,-.1015;-2.7814,-4.3474,2.1257;-1.1208,-2.8666,3.5856;1.1778,-2.1463,2.938;1.7422,4.5729,.377;.5913,5.3054,.1179;-.0465,5.1308,-1.1054;.4522,4.2688,-2.0789;1.5998,3.5375,-1.8005;2.2294,4.6633,1.3509;.1726,5.9884,.8577;-1.2953,5.8513,-1.3654;-.0679,4.1679,-3.0322;1.9836,2.8371,-2.5441;-3.1016,-4.2985,3.2919;-3.5343,-4.6539,1.2193;-1.7361,5.837,-2.4944;-1.8329,6.4111,-.4283;4.6417,-3.2113,-.4911;4.9573,-1.8216,-.4921;5.5422,-4.133,-1.0932;6.6933,-3.6987,-1.7022;5.2928,-5.1983,-1.0733;7.3762,-4.4153,-2.1668;6.142,-1.4016,-1.1597;6.986,-2.3142,-1.7456;6.3761,-.3364,-1.2117;7.8888,-1.9668,-2.2557;5.4503,1.1344,.8452;5.5915,2.5527,.8808;6.4442,.3452,1.4899;7.5378,.9284,2.0835;6.3295,-.7401,1.5168;8.2867,.2999,2.5736;6.7417,3.1261,1.4902;7.6999,2.3347,2.0732;6.8427,4.2158,1.4966;8.5782,2.7863,2.5427;-4.6486,-.4956,-2.561;-5.5032,-1.1099,-2.2387;-5.0227,.2452,-3.2928;-3.9332,-1.1448,-3.0903;-2.683,.9107,-1.7552;-2.8487,1.6657,-2.545;-2.2022,1.4007,-.894;-1.9566,.189,-2.1619;</scalar>
</formula>
</molecule>
               </property>
               <property dictRef="cc:thermochemistry">
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662933160133</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923836643597</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.739096516536</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981912110873</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985688849150</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.677244310983</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064604747</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000378847739</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.831397142807</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.831536017326</scalar>
                  </module>
                  <module cmlx:templateRef="thermo">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                     <list cmlx:templateRef="state"/>
                     <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662933160133</scalar>
                     <scalar cmlx:templateRef="zpe" dataType="xsd:double" dictRef="cc:zpe.correction" units="nonsi:hartree">0.923836643597</scalar>
                     <scalar cmlx:templateRef="elec-zpe" dataType="xsd:double" dictRef="cc:zpe.sumelectzpe" units="nonsi:hartree">-3666.739096516536</scalar>
                     <scalar cmlx:templateRef="thermal-tr" dataType="xsd:double" dictRef="cc:ethermo.trans" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-rot" dataType="xsd:double" dictRef="cc:ethermo.rot" units="nonsi:hartree">0.001416276854</scalar>
                     <scalar cmlx:templateRef="thermal-vib" dataType="xsd:double" dictRef="cc:ethermo.vib" units="nonsi:hartree">0.981912110873</scalar>
                     <scalar cmlx:templateRef="enthalpy-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrenthalpy" units="nonsi:hartree">0.985688849150</scalar>
                     <scalar cmlx:templateRef="enthalpy" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalent" units="nonsi:hartree">-3666.677244310983</scalar>
                     <scalar cmlx:templateRef="entropy-el" dataType="xsd:double" dictRef="cc:s.elect" units="nonsi2:hartree.K-1">0.000000000000</scalar>
                     <scalar cmlx:templateRef="entropy-tr" dataType="xsd:double" dictRef="cc:s.trans" units="nonsi2:hartree.K-1">0.000074044432</scalar>
                     <scalar cmlx:templateRef="entropy-rot" dataType="xsd:double" dictRef="cc:s.rot" units="nonsi2:hartree.K-1">0.000064604747</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber" units="nonsi2:hartree.K-1">1</scalar>
                     <list cmlx:templateRef="entropy-rot"/>
                     <scalar cmlx:templateRef="entropy-vib" dataType="xsd:double" dictRef="cc:s.vib" units="nonsi2:hartree.K-1">0.000378847739</scalar>
                     <scalar cmlx:templateRef="gibbs-corr" dataType="xsd:double" dictRef="cc:zpe.thermalcorrgfe" units="nonsi:hartree">0.831397142807</scalar>
                     <scalar cmlx:templateRef="gibbs" dataType="xsd:double" dictRef="cc:zpe.sumelectthermalfe" units="nonsi:hartree">-3666.831536017326</scalar>
                  </module>
               </property>
            </propertyList>
            <molecule cmlx:templateRef="atom" id="molecule">
               <atomArray>
                  <atom elementType="C" id="a1" x3="4.9175753" y3="-0.9542665" z3="-0.68408421">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a2" x3="6.60082306" y3="-1.95030461" z3="-1.55067152">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a3" x3="6.0830632" y3="-0.99599056" z3="-1.41375449">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a4" x3="4.77329855" y3="1.47746574" z3="-1.06911808">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a5" x3="4.28621139" y3="0.31150764" z3="-0.50367815">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a6" x3="2.65375872" y3="2.73811366" z3="-1.15560673">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a7" x3="4.00369962" y3="2.73569463" z3="-0.85158147">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a8" x3="2.37841192" y3="4.99509988" z3="-0.37907862">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a9" x3="1.80717963" y3="3.85302565" z3="-0.88890754">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a10" x3="1.75260631" y3="5.87093495" z3="-0.18140205">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a11" x3="2.08733357" y3="1.61249207" z3="-1.67972597">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a12" x3="3.1267121" y3="0.35902911" z3="0.21514273">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="P" id="a13" x3="1.71217672" y3="0.38395354" z3="-0.64128533">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">15</scalar>
                  </atom>
                  <atom elementType="O" id="a14" x3="0.60811091" y3="0.7322144" z3="0.28773522">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a15" x3="1.6627385" y3="-0.85663244" z3="-1.50509974">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="H" id="a16" x3="1.09551117" y3="-2.47434187" z3="-1.32195461">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a17" x3="2.02951179" y3="-5.49877359" z3="-6.26854522">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a18" x3="1.76146999" y3="-5.06263418" z3="-5.30199385">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a19" x3="1.05853219" y3="-3.91777398" z3="-2.84802128">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a20" x3="1.72803507" y3="-3.68191076" z3="-5.15714587">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a21" x3="1.47218859" y3="-5.88747304" z3="-4.2121256">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a22" x3="1.13519079" y3="-5.30893401" z3="-2.99489941">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a23" x3="1.38565412" y3="-3.07772919" z3="-3.93688397">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a24" x3="1.9606981" y3="-3.01604238" z3="-5.99180321">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a25" x3="1.52269173" y3="-6.97534058" z3="-4.30388418">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a26" x3="0.94727505" y3="-5.94057568" z3="-2.12251059">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a27" x3="0.65440294" y3="-3.36774143" z3="-1.6046503">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="C" id="a28" x3="-0.34554292" y3="-3.85027181" z3="-0.85859242">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a29" x3="-0.68878668" y3="-4.85276126" z3="-1.12732337">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a30" x3="-0.38131963" y3="-3.54821912" z3="0.58985538">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a31" x3="-0.41633325" y3="-3.07328394" z3="3.34846103">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a32" x3="-0.69078941" y3="-4.58271588" z3="1.48147468">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a33" x3="-0.10879452" y3="-2.27161917" z3="1.09084373">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a34" x3="-0.12317644" y3="-2.03642528" z3="2.46135806">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a35" x3="-0.69970857" y3="-4.34740012" z3="2.85512217">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a36" x3="-0.8830967" y3="-5.59032097" z3="1.10135644">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a37" x3="0.10159987" y3="-1.43187465" z3="0.42749437">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a38" x3="0.10414123" y3="-1.02899908" z3="2.82040409">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a39" x3="-0.90721687" y3="-5.17150379" z3="3.54281601">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a40" x3="-0.41683852" y3="-2.89231959" z3="4.42730658">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a41" x3="1.33861648" y3="-1.74187864" z3="-3.90931363">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="H" id="a42" x3="1.47051229" y3="-1.33475463" z3="-3.00738663">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a43" x3="0.33653508" y3="3.71244481" z3="-1.04365696">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a44" x3="-2.13139292" y3="-2.983266" z3="-1.71096121">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a45" x3="-2.91893643" y3="-3.16083108" z3="-0.5693375">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="O" id="a46" x3="-3.11030311" y3="-2.28697683" z3="0.3639816">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="Si" id="a47" x3="-3.83504806" y3="-0.7204573" z3="0.62198936">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                  </atom>
                  <atom elementType="C" id="a48" x3="-4.69946513" y3="-0.24859067" z3="-0.96251401">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a49" x3="-2.5255079" y3="0.4524633" z3="1.21171401">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a50" x3="-5.07573696" y3="-1.06070779" z3="1.98086256">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="O" id="a51" x3="-3.40454028" y3="-4.37156533" z3="-0.33589268">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="C" id="a52" x3="-4.12338721" y3="-4.61110945" z3="0.86457796">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a53" x3="-4.00192827" y3="0.05399212" z3="-1.75904937">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a54" x3="-5.36529366" y3="0.61268" z3="-0.77233492">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a55" x3="-5.32028099" y3="-1.07929651" z3="-1.34402311">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a56" x3="-1.63529395" y3="0.553175" z3="0.56414588">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a57" x3="-2.16532728" y3="0.1467144" z3="2.20947817">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a58" x3="-2.99215269" y3="1.45008588" z3="1.31052404">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a59" x3="-5.53703572" y3="-0.11313049" z3="2.31329315">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a60" x3="-5.88850984" y3="-1.72850042" z3="1.6450784">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a61" x3="-4.58475181" y3="-1.52218542" z3="2.85593925">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a62" x3="-5.05922488" y3="-4.02874786" z3="0.88000072">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a63" x3="-3.51323821" y3="-4.35727114" z3="1.74520221">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a64" x3="-4.35470219" y3="-5.68460057" z3="0.85797466">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a65" x3="4.27978696" y3="-2.19584798" z3="-0.17345676">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a66" x3="4.13680241" y3="-3.29460737" z3="-1.03308196">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a67" x3="3.49335941" y3="-4.45317315" z3="-0.6147092">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a68" x3="2.99774668" y3="-4.50788125" z3="0.68248885">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a69" x3="3.14674296" y3="-3.44818537" z3="1.57230138">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a70" x3="3.78109641" y3="-2.29214699" z3="1.13542713">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a71" x3="4.49259937" y3="-3.22444491" z3="-2.06424855">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a72" x3="3.35159674" y3="-5.29464347" z3="-1.29349267">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a73" x3="2.26033679" y3="-5.69584723" z3="1.11466759">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="H" id="a74" x3="2.74088895" y3="-3.52831463" z3="2.58179763">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a75" x3="3.87503361" y3="-1.44349287" z3="1.81443921">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a76" x3="-0.49011448" y3="4.01931163" z3="0.04556455">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a77" x3="-1.86120009" y3="3.80788801" z3="-0.01416406">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a78" x3="-2.4033105" y3="3.28849872" z3="-1.18465689">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a79" x3="-1.61600048" y3="3.00485046" z3="-2.29782801">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a80" x3="-0.24520138" y3="3.21446585" z3="-2.21858203">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a81" x3="-0.04186083" y3="4.38281918" z3="0.97342963">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a82" x3="-2.50724194" y3="4.01787574" z3="0.83883675">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="N" id="a83" x3="-3.83930918" y3="3.00308907" z3="-1.23759761">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                  </atom>
                  <atom elementType="H" id="a84" x3="-2.07864725" y3="2.61100092" z3="-3.20355266">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a85" x3="0.38577433" y3="2.96840787" z3="-3.0741931">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="O" id="a86" x3="2.16642889" y3="-5.9057947" z3="2.30299923">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a87" x3="1.76686609" y3="-6.39933992" z3="0.25212963">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a88" x3="-4.3263138" y3="2.73160592" z3="-2.31381413">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="O" id="a89" x3="-4.46317028" y3="3.03636247" z3="-0.19340722">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                  </atom>
                  <atom elementType="C" id="a90" x3="6.6229666" y3="0.16401824" z3="-2.02699655">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a91" x3="5.94699061" y3="1.41098868" z3="-1.88892104">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a92" x3="7.80296405" y3="0.09243237" z3="-2.81786796">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a93" x3="8.27998526" y3="1.19958628" z3="-3.4745134">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a94" x3="8.31851353" y3="-0.86902443" z3="-2.90399989">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a95" x3="9.18516605" y3="1.13227964" z3="-4.08437686">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a96" x3="6.4494077" y3="2.53141621" z3="-2.6083826">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a97" x3="7.58402954" y3="2.42853784" z3="-3.3768792">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a98" x3="5.91784203" y3="3.48353119" z3="-2.55255139">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a99" x3="7.94881259" y3="3.30291044" z3="-3.92325502">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a100" x3="4.57838325" y3="3.90629547" z3="-0.2550486">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a101" x3="3.76002007" y3="5.05751616" z3="-0.06114844">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a102" x3="5.92824119" y3="3.95989542" z3="0.19350257">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a103" x3="6.44597028" y3="5.10543228" z3="0.74868103">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a104" x3="6.55773847" y3="3.07298936" z3="0.09919741">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a105" x3="7.48597171" y3="5.12049255" z3="1.0867874">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a106" x3="4.32840555" y3="6.23292114" z3="0.50319462">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="C" id="a107" x3="5.64405233" y3="6.2629313" z3="0.89383593">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a108" x3="3.69090694" y3="7.11302024" z3="0.63219932">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a109" x3="6.0697864" y3="7.1706206" z3="1.33051311">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a110" x3="-2.34901333" y3="-3.92904723" z3="-2.87537987">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a111" x3="-2.53156248" y3="-4.96509304" z3="-2.55152823">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a112" x3="-3.22110828" y3="-3.60403218" z3="-3.47378453">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a113" x3="-1.47358218" y3="-3.92246086" z3="-3.54396993">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="C" id="a114" x3="-1.69203414" y3="-1.59541938" z3="-2.09220652">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                  </atom>
                  <atom elementType="H" id="a115" x3="-2.42780077" y3="-1.11963526" z3="-2.76564835">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a116" x3="-1.52708484" y3="-0.93476646" z3="-1.22662617">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
                  <atom elementType="H" id="a117" x3="-0.74259914" y3="-1.63916326" z3="-2.64949748">
                     <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                  </atom>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a3" order="S"/>
                  <bond atomRefs2="a1 a65" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a3 a90" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a91" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a6 a9" order="S"/>
                  <bond atomRefs2="a6 a11" order="S"/>
                  <bond atomRefs2="a7 a100" order="S"/>
                  <bond atomRefs2="a8 a10" order="S"/>
                  <bond atomRefs2="a8 a101" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a9 a43" order="S"/>
                  <bond atomRefs2="a11 a13" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a16 a27" order="S"/>
                  <bond atomRefs2="a17 a18" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a19 a23" order="S"/>
                  <bond atomRefs2="a19 a22" order="S"/>
                  <bond atomRefs2="a19 a27" order="S"/>
                  <bond atomRefs2="a20 a24" order="S"/>
                  <bond atomRefs2="a20 a23" order="S"/>
                  <bond atomRefs2="a21 a22" order="S"/>
                  <bond atomRefs2="a21 a25" order="S"/>
                  <bond atomRefs2="a22 a26" order="S"/>
                  <bond atomRefs2="a23 a41" order="S"/>
                  <bond atomRefs2="a27 a28" order="S"/>
                  <bond atomRefs2="a28 a30" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a30 a32" order="S"/>
                  <bond atomRefs2="a30 a33" order="S"/>
                  <bond atomRefs2="a31 a40" order="S"/>
                  <bond atomRefs2="a31 a35" order="S"/>
                  <bond atomRefs2="a31 a34" order="S"/>
                  <bond atomRefs2="a32 a36" order="S"/>
                  <bond atomRefs2="a32 a35" order="S"/>
                  <bond atomRefs2="a33 a37" order="S"/>
                  <bond atomRefs2="a33 a34" order="S"/>
                  <bond atomRefs2="a34 a38" order="S"/>
                  <bond atomRefs2="a35 a39" order="S"/>
                  <bond atomRefs2="a41 a42" order="S"/>
                  <bond atomRefs2="a43 a80" order="S"/>
                  <bond atomRefs2="a43 a76" order="S"/>
                  <bond atomRefs2="a44 a114" order="S"/>
                  <bond atomRefs2="a44 a45" order="S"/>
                  <bond atomRefs2="a44 a110" order="S"/>
                  <bond atomRefs2="a45 a46" order="S"/>
                  <bond atomRefs2="a45 a51" order="S"/>
                  <bond atomRefs2="a46 a47" order="S"/>
                  <bond atomRefs2="a47 a49" order="S"/>
                  <bond atomRefs2="a47 a50" order="S"/>
                  <bond atomRefs2="a47 a48" order="S"/>
                  <bond atomRefs2="a48 a53" order="S"/>
                  <bond atomRefs2="a48 a55" order="S"/>
                  <bond atomRefs2="a48 a54" order="S"/>
                  <bond atomRefs2="a49 a57" order="S"/>
                  <bond atomRefs2="a49 a58" order="S"/>
                  <bond atomRefs2="a49 a56" order="S"/>
                  <bond atomRefs2="a50 a59" order="S"/>
                  <bond atomRefs2="a50 a60" order="S"/>
                  <bond atomRefs2="a50 a61" order="S"/>
                  <bond atomRefs2="a51 a52" order="S"/>
                  <bond atomRefs2="a52 a63" order="S"/>
                  <bond atomRefs2="a52 a64" order="S"/>
                  <bond atomRefs2="a52 a62" order="S"/>
                  <bond atomRefs2="a65 a70" order="S"/>
                  <bond atomRefs2="a65 a66" order="S"/>
                  <bond atomRefs2="a66 a67" order="S"/>
                  <bond atomRefs2="a66 a71" order="S"/>
                  <bond atomRefs2="a67 a72" order="S"/>
                  <bond atomRefs2="a67 a68" order="S"/>
                  <bond atomRefs2="a68 a69" order="S"/>
                  <bond atomRefs2="a68 a73" order="S"/>
                  <bond atomRefs2="a69 a74" order="S"/>
                  <bond atomRefs2="a69 a70" order="S"/>
                  <bond atomRefs2="a70 a75" order="S"/>
                  <bond atomRefs2="a73 a86" order="S"/>
                  <bond atomRefs2="a73 a87" order="S"/>
                  <bond atomRefs2="a76 a77" order="S"/>
                  <bond atomRefs2="a76 a81" order="S"/>
                  <bond atomRefs2="a77 a82" order="S"/>
                  <bond atomRefs2="a77 a78" order="S"/>
                  <bond atomRefs2="a78 a79" order="S"/>
                  <bond atomRefs2="a78 a83" order="S"/>
                  <bond atomRefs2="a79 a80" order="S"/>
                  <bond atomRefs2="a79 a84" order="S"/>
                  <bond atomRefs2="a80 a85" order="S"/>
                  <bond atomRefs2="a83 a89" order="S"/>
                  <bond atomRefs2="a83 a88" order="S"/>
                  <bond atomRefs2="a90 a92" order="S"/>
                  <bond atomRefs2="a90 a91" order="S"/>
                  <bond atomRefs2="a91 a96" order="S"/>
                  <bond atomRefs2="a92 a93" order="S"/>
                  <bond atomRefs2="a92 a94" order="S"/>
                  <bond atomRefs2="a93 a97" order="S"/>
                  <bond atomRefs2="a93 a95" order="S"/>
                  <bond atomRefs2="a96 a97" order="S"/>
                  <bond atomRefs2="a96 a98" order="S"/>
                  <bond atomRefs2="a97 a99" order="S"/>
                  <bond atomRefs2="a100 a102" order="S"/>
                  <bond atomRefs2="a100 a101" order="S"/>
                  <bond atomRefs2="a101 a106" order="S"/>
                  <bond atomRefs2="a102 a103" order="S"/>
                  <bond atomRefs2="a102 a104" order="S"/>
                  <bond atomRefs2="a103 a105" order="S"/>
                  <bond atomRefs2="a103 a107" order="S"/>
                  <bond atomRefs2="a106 a108" order="S"/>
                  <bond atomRefs2="a106 a107" order="S"/>
                  <bond atomRefs2="a107 a109" order="S"/>
                  <bond atomRefs2="a110 a112" order="S"/>
                  <bond atomRefs2="a110 a111" order="S"/>
                  <bond atomRefs2="a110 a113" order="S"/>
                  <bond atomRefs2="a114 a117" order="S"/>
                  <bond atomRefs2="a114 a116" order="S"/>
                  <bond atomRefs2="a114 a115" order="S"/>
               </bondArray>
               <formula concise="C53H48N3O11PSi">
                  <atomArray count="53 48 3 11 1 1" elementType="C H N O P Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">913.639861000001</scalar>
               </property>
            <formula convention="iupac:inchi" inline="InChI=1/C32H18N2O8P.C13H12NO.C8H18O2Si/c35-33(36)23-13-9-19(10-14-23)27-17-21-5-1-3-7-25(21)29-30-26-8-4-2-6-22(26)18-28(20-11-15-24(16-12-20)34(37)38)32(30)42-43(39,40)41-31(27)29;15-13-9-5-4-8-12(13)14-10-11-6-2-1-3-7-11;1-7(2)8(9-3)10-11(4,5)6/h1-18H;1-10,14-15H;1-6H3">
<scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:93,107,97,103,92,106,96,102,66,70,76,80,67,69,77,79,3,8,65,43,90,101,68,78,91,100,1,9,4,7,5,6,73,83,86,87,88,89,14,15,12,11,13;31,34,35,21,18,33,32,22,20,28,30,19,23,27,41;110,114,52,48,49,50,44,45,51,46,47/E:(1,2)(3,4)(5,6)(7,8)(9,10,11,12)(13,14,15,16)(17,18)(19,20)(21,22)(23,24)(25,26)(27,28)(29,30)(31,32)(33,34)(35,36,37,38)(39,40)(41,42);(2,3)(6,7);(1,2)(4,5,6)/CRV:1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,18.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3,26.3,27.3,28.3,29.3,30.3,31.3,32.3,35.1,36.1,37.1,38.1,39.1,40.1,43.4;1.3,2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,12.3,13.3;7.3,8.3/rA:117nC3HC3C3C3C3C3C3C3HOOP4O1O1HHC3C3C3C3C3C3HHHNC3HC3C3C3C3C3C3HHHHHOHC3C3C3OSiCCCOCHHHHHHHHHHHHC3C3C3C3C3C3HHNHHC3C3C3C3C3HHNHHO1O1O1O1C3C3C3C3HHC3C3HHC3C3C3C3HHC3C3HHCHHHCHHH/rB:;s1s2;;s1s4;;s4s6;;s6s8;s8;s6;s5;s11s12;s13;s13;;;s17;;s18;s18;s19s21;s19s20;s20;s21;s22;s16s19;s27;s28;s28;;s30;s30;s31s33;s31s32;s32;s33;s34;s35;s31;s23;s41;s9;;s44;s45;s46;s47;s47;s47;s45;s51;s48;s48;s48;s49;s49;s49;s50;s50;s50;s52;s52;s52;s1;s65;s66;s67;s68;s65s69;s66;s67;s68;s69;s70;s43;s76;s77;s78;s43s79;s76;s77;s78;s79;s80;s73;s73;s83;s83;s3;s4s90;s90;s92;s92;s93;s91;s93s96;s96;s97;s7;s8s100;s100;s102;s102;s103;s101;s103s106;s106;s107;s44;s110;s110;s110;s44;s114;s114;s114;/rC:4.9176,-.9543,-.6841;6.6008,-1.9503,-1.5507;6.0831,-.996,-1.4138;4.7733,1.4775,-1.0691;4.2862,.3115,-.5037;2.6538,2.7381,-1.1556;4.0037,2.7357,-.8516;2.3784,4.9951,-.3791;1.8072,3.853,-.8889;1.7526,5.8709,-.1814;2.0873,1.6125,-1.6797;3.1267,.359,.2151;1.7122,.384,-.6413;.6081,.7322,.2877;1.6627,-.8566,-1.5051;1.0955,-2.4743,-1.322;2.0295,-5.4988,-6.2685;1.7615,-5.0626,-5.302;1.0585,-3.9178,-2.848;1.728,-3.6819,-5.1571;1.4722,-5.8875,-4.2121;1.1352,-5.3089,-2.9949;1.3857,-3.0777,-3.9369;1.9607,-3.016,-5.9918;1.5227,-6.9753,-4.3039;.9473,-5.9406,-2.1225;.6544,-3.3677,-1.6047;-.3455,-3.8503,-.8586;-.6888,-4.8528,-1.1273;-.3813,-3.5482,.5899;-.4163,-3.0733,3.3485;-.6908,-4.5827,1.4815;-.1088,-2.2716,1.0908;-.1232,-2.0364,2.4614;-.6997,-4.3474,2.8551;-.8831,-5.5903,1.1014;.1016,-1.4319,.4275;.1041,-1.029,2.8204;-.9072,-5.1715,3.5428;-.4168,-2.8923,4.4273;1.3386,-1.7419,-3.9093;1.4705,-1.3348,-3.0074;.3365,3.7124,-1.0437;-2.1314,-2.9833,-1.711;-2.9189,-3.1608,-.5693;-3.1103,-2.287,.364;-3.835,-.7205,.622;-4.6995,-.2486,-.9625;-2.5255,.4525,1.2117;-5.0757,-1.0607,1.9809;-3.4045,-4.3716,-.3359;-4.1234,-4.6111,.8646;-4.0019,.054,-1.759;-5.3653,.6127,-.7723;-5.3203,-1.0793,-1.344;-1.6353,.5532,.5641;-2.1653,.1467,2.2095;-2.9922,1.4501,1.3105;-5.537,-.1131,2.3133;-5.8885,-1.7285,1.6451;-4.5848,-1.5222,2.8559;-5.0592,-4.0287,.88;-3.5132,-4.3573,1.7452;-4.3547,-5.6846,.858;4.2798,-2.1958,-.1735;4.1368,-3.2946,-1.0331;3.4934,-4.4532,-.6147;2.9977,-4.5079,.6825;3.1467,-3.4482,1.5723;3.7811,-2.2921,1.1354;4.4926,-3.2244,-2.0642;3.3516,-5.2946,-1.2935;2.2603,-5.6958,1.1147;2.7409,-3.5283,2.5818;3.875,-1.4435,1.8144;-.4901,4.0193,.0456;-1.8612,3.8079,-.0142;-2.4033,3.2885,-1.1847;-1.616,3.0049,-2.2978;-.2452,3.2145,-2.2186;-.0419,4.3828,.9734;-2.5072,4.0179,.8388;-3.8393,3.0031,-1.2376;-2.0786,2.611,-3.2036;.3858,2.9684,-3.0742;2.1664,-5.9058,2.303;1.7669,-6.3993,.2521;-4.3263,2.7316,-2.3138;-4.4632,3.0364,-.1934;6.623,.164,-2.027;5.947,1.411,-1.8889;7.803,.0924,-2.8179;8.28,1.1996,-3.4745;8.3185,-.869,-2.904;9.1852,1.1323,-4.0844;6.4494,2.5314,-2.6084;7.584,2.4285,-3.3769;5.9178,3.4835,-2.5526;7.9488,3.3029,-3.9233;4.5784,3.9063,-.255;3.76,5.0575,-.0611;5.9282,3.9599,.1935;6.446,5.1054,.7487;6.5577,3.073,.0992;7.486,5.1205,1.0868;4.3284,6.2329,.5032;5.6441,6.2629,.8938;3.6909,7.113,.6322;6.0698,7.1706,1.3305;-2.349,-3.929,-2.8754;-2.5316,-4.9651,-2.5515;-3.2211,-3.604,-3.4738;-1.4736,-3.9225,-3.544;-1.692,-1.5954,-2.0922;-2.4278,-1.1196,-2.7656;-1.5271,-.9348,-1.2266;-.7426,-1.6392,-2.6495;</scalar>
</formula>
</molecule>
            <module dictRef="energy.info" id="energy.info1">
               <scalar cmlx:templateRef="symmetry-group" dataType="xsd:string" dictRef="cc:pointgroup">--</scalar>
               <scalar cmlx:templateRef="energy" dataType="xsd:double" dictRef="cc:energy" units="nonsi:hartree">-3667.662933160133</scalar>
               <scalar cmlx:templateRef="spinsqr" dataType="xsd:double" dictRef="cc:s2">0.000000000000</scalar>
               <array cmlx:templateRef="gradient-vector" dataType="xsd:double" dictRef="cc:grad" size="351">-0.000000500204 0.000000155400 0.000000325495 -0.000000481275 0.000000511746 0.000002266139 -0.000000947987 -0.000000106808 0.000001649665 -0.000000634622 -0.000000455159 -0.000000632033 -0.000000595377 -0.000000143136 -0.000000616789 0.000000464048 0.000000808914 -0.000000662385 -0.000002170327 -0.000001035936 -0.000002081679 -0.000002635430 0.000009901375 0.000004415436 -0.000000831440 -0.000001193508 0.000000071144 0.000007903574 -0.000010346134 -0.000006185898 -0.000003199036 0.000002380467 -0.000002300660 -0.000001563958 0.000000671239 -0.000002458674 -0.000001364981 -0.000001077049 -0.000002228156 -0.000000473805 -0.000001964388 -0.000004049334 0.000000713823 0.000002540026 -0.000000478135 0.000001527759 0.000002780998 -0.000001015978 -0.000000560577 -0.000000885644 0.000000973936 -0.000000187704 -0.000000628062 -0.000000654323 -0.000000635440 0.000000512394 -0.000000854364 -0.000000840457 -0.000000165612 0.000000393047 -0.000000382253 -0.000000227844 0.000001397916 0.000000362863 -0.000000339733 -0.000001623518 -0.000000444639 -0.000000178767 -0.000002460691 -0.000000875182 -0.000001213627 -0.000000853831 0.000000146754 -0.000000748773 0.000000623188 0.000000521800 -0.000000994542 0.000000714041 -0.000002547254 -0.000005475895 0.000001110738 0.000002869188 -0.000001634174 -0.000003345926 0.000000443020 0.000001033362 -0.000000137218 -0.000000625747 0.000004508076 0.000006287310 0.000000466415 -0.000003118807 -0.000004642198 0.000001688015 0.000009614584 -0.000004149318 0.000001043022 -0.000010935991 -0.000000735210 -0.000001428105 -0.000001113656 0.000001354993 0.000001479405 0.000000840943 0.000003950754 0.000000190237 0.000000119021 -0.000000629950 -0.000000760981 -0.000002236811 0.000000069097 -0.000001214086 -0.000002224122 -0.000000758014 0.000000638207 0.000006431860 -0.000004853470 -0.000000419762 0.000000817539 -0.000000375979 0.000000186793 -0.000001085476 0.000001679728 -0.000001427511 -0.000001565030 -0.000004421976 0.000000993894 0.000000840485 0.000000232445 -0.000004483388 0.000004850860 -0.000005636152 -0.000003675589 -0.000006242974 0.000006992383 -0.000004342574 0.000000953933 -0.000002421253 0.000003701290 -0.000003394218 -0.000003077774 0.000015784614 -0.000001890689 -0.000000861443 -0.000028761564 -0.000009454174 0.000018553185 0.000005977772 0.000010590416 0.000013524304 0.000004580298 0.000011383965 0.000002461773 -0.000005699934 -0.000012785483 -0.000002112849 -0.000011620493 -0.000004439247 0.000009680840 0.000001698655 0.000002061518 -0.000009530099 0.000010464750 0.000008248979 0.000002734720 0.000007732755 0.000006844082 -0.000030560517 0.000037969222 -0.000011940991 0.000020339838 -0.000008753868 0.000013480205 0.000005263470 0.000005463674 -0.000013000641 -0.000021516751 -0.000005810604 -0.000008583522 0.000005391133 -0.000016101768 0.000011821503 -0.000013397810 0.000005499485 -0.000004525200 0.000000013094 -0.000000070776 0.000002383781 -0.000002937192 0.000003043779 0.000013173478 -0.000000703699 -0.000001012654 -0.000002952046 -0.000000713752 -0.000001347517 0.000002385751 0.000002384967 -0.000000357624 0.000001110744 -0.000000130849 -0.000000843032 0.000001148792 0.000002121137 0.000000121423 0.000001181352 -0.000001644848 -0.000002658937 0.000002229856 0.000003094791 -0.000000299892 -0.000000163224 0.000000707966 0.000000088039 0.000000013769 0.000000215649 -0.000000261639 -0.000002267218 0.000003356676 -0.000002523518 0.000000001938 0.000000042481 -0.000001187605 -0.000006637376 -0.000002657615 0.000000515171 -0.000000114974 0.000002873940 -0.000000861020 0.000000038387 -0.000006062862 0.000005099935 0.000001737452 0.000008437185 0.000001291420 0.000000264474 0.000005168681 -0.000002687061 0.000000465011 -0.000010196954 -0.000000802561 0.000000543521 -0.000002324414 0.000001380000 -0.000000115393 0.000002031611 0.000000899170 0.000012481358 0.000006965094 -0.000000474238 0.000000114685 0.000002443956 0.000000559202 -0.000003318228 0.000011550452 0.000000113215 0.000001336894 -0.000007580417 0.000000914728 0.000001939070 0.000002513893 0.000002148263 -0.000024369563 -0.000006542727 -0.000006078559 0.000010828049 0.000008535259 0.000000238992 0.000000173145 0.000001382854 0.000000316145 -0.000001438475 -0.000000236928 0.000000630971 -0.000000727754 0.000002592440 0.000001145343 -0.000000665536 0.000002425597 0.000000492607 0.000000592039 0.000003622932 0.000001558209 -0.000001008006 0.000003462988 0.000001043955 -0.000001278182 0.000001322936 0.000001268868 -0.000001845532 0.000001068240 0.000000220620 -0.000000292255 -0.000000439404 0.000001395241 -0.000001555995 0.000001032058 -0.000002605699 0.000002336123 -0.000000872742 -0.000004592237 0.000003066426 -0.000001374150 -0.000011141037 0.000017405388 0.000006486474 -0.000006687144 0.000002982912 -0.000001517038 0.000011645374 -0.000020892804 -0.000008664003 0.000006413109 -0.000001371780 -0.000000439187 -0.000007173193 0.000013389039 0.000003442889 -0.000001781230 0.000003659768 -0.000001700644 0.000009761956 -0.000014720189 -0.000009383458 -0.000000249497 -0.000001292556 -0.000004242706 -0.000002471020 0.000004625519 -0.000000066954 0.000003393599 0.000007893812 -0.000000308973 0.000004215307 -0.000001773419 0.000003837093 -0.000003022555 -0.000000343606 0.000002118185 0.000007805097 -0.000004924476 0.000004302436 0.000005726666 -0.000008131432 0.000000533539 -0.000002874024 0.000001740174 -0.000007373179 -0.000012895530 0.000003605250 0.000007890849</array>
               <array cmlx:templateRef="hess" dataType="xsd:double" dictRef="cc:hessianmatrix" size="61776">0.580273098 -0.016239356 0.634411335 -0.265254982 -0.045609387 0.344909405 -0.006165585 0.023959768 0.003161202 0.117405990 -0.000918414 0.002010992 0.001043451 -0.126510877 0.286578875 0.009704753 -0.014322635 0.001984419 -0.032434209 0.028275143 -0.310278420 -0.011842787 0.155478861 -0.116465717 0.118388239 0.037938817 -0.129856361 -0.017503877 0.117102543 -0.271690188 0.144113303 0.016124577 -0.158241214 0.026007828 -0.027603366 0.041700665 -0.016834973 -0.019263897 -0.000816507 -0.000691006 0.019757485 -0.050228638 -0.002847480 -0.000672425 0.000323427 -0.026469757 0.023740091 0.022813021 0.000140292 0.000340405 -0.122265303 0.088776188 0.021831436 -0.000374731 0.000157051 0.029337481 -0.247534920 0.013127524 -0.001215944 0.001394855 0.032258993 -0.018410838 -0.089260214 0.005313740 0.001135712 -0.001202405 0.000383188 0.000848948 -0.000011463 -0.000024187 -0.000861416 -0.000657490 -0.000622066 -0.000053640 -0.000025478 -0.000833298 -0.000936953 -0.000386085 0.000056476 -0.000019545 0.001168851 -0.002024169 0.004505497 -0.000143546 -0.000007205 -0.001755549 -0.001569412 0.003300056 -0.000095292 -0.000011023 0.003827455 0.002161439 0.003330554 -0.000290574 -0.000108575 0.000368534 -0.000338549 0.000000291 -0.000018623 -0.000003130 0.000073132 -0.000203026 -0.000150239 0.000011900 -0.000012826 0.000155412 -0.000118852 -0.000023988 -0.000004557 -0.000010598 0.000216326 -0.000158474 -0.000050936 -0.000003993 -0.000011125 -0.000321824 0.000501143 0.000176500 -0.000001482 0.000014580 -0.000215804 0.000083500 -0.000156360 0.000012691 0.000015867 0.000004779 -0.000013219 -0.000019849 -0.000000082 0.000000750 -0.000006472 0.000003750 -0.000006103 0.000004857 -0.000002749 0.000007332 0.000030218 -0.000003494 0.000001836 -0.000000368 0.001000595 -0.000791089 -0.000014468 -0.000148960 0.000031069 0.001843132 0.000339293 -0.000501979 0.000033354 0.000016455 -0.001541751 0.001243979 0.001375483 -0.000160180 0.000017673 -0.037034751 0.009744836 0.023494933 -0.001900975 0.000179806 0.033743204 0.001374537 -0.019364174 0.001247268 0.000098332 0.012863404 -0.005140080 -0.000561507 0.000134624 -0.000053001 0.006241704 -0.001588151 -0.003740068 0.000995166 -0.000284455 0.001376526 0.001889928 -0.001582084 0.000464484 -0.000035978 0.008552052 -0.001246723 -0.003611194 0.000682005 -0.000125942 -0.002347019 -0.000499747 0.001286087 -0.000303299 0.000074324 -0.000053348 -0.000398835 0.000169213 -0.000089044 0.000010735 -0.000746451 0.000038169 0.000056632 -0.000020640 -0.000007730 -0.000412581 0.000275336 0.000159568 -0.000087244 0.000063778 -0.001157983 -0.001138242 0.000523011 -0.000361909 0.000094313 -0.001133952 0.000418140 0.000547017 -0.000228648 0.000084339 0.000057951 -0.000213649 0.000020059 0.000001102 -0.000015037 0.000197949 0.000104278 -0.000269241 0.000111261 -0.000033617 -0.000010847 -0.000123862 0.000011138 -0.000015455 -0.000001963 0.000000208 -0.000000733 0.000003683 -0.000004901 0.000001403 -0.000004205 0.000004914 0.000005094 -0.000000598 0.000001583 -0.000005015 0.000009968 0.000002780 0.000000210 0.000001525 0.000004875 -0.000003020 -0.000003690 0.000010006 -0.000002523 0.000021566 0.000044721 0.000001466 -0.000010188 0.000008216 -0.000007811 -0.000006599 0.000010526 -0.000009434 -0.000000381 -0.000028236 0.000053031 0.000028193 -0.000012113 0.000007587 -0.000003422 0.000001320 -0.000012083 0.000011962 0.000003148 0.000022851 -0.000073007 -0.000081560 0.000047892 -0.000019139 0.000003722 0.000013962 -0.000009887 0.000023974 -0.000006198 -0.000043196 -0.000039597 0.000046723 -0.000009076 0.000001032 -0.000020588 -0.000036174 0.000016164 -0.000007481 -0.000002379 0.000006220 -0.000003614 -0.000024592 0.000013005 -0.000001276 -0.000017208 -0.000026460 0.000031705 -0.000015380 0.000000506 0.000007679 0.000041270 0.000019345 -0.000003247 0.000006409 -0.000010145 0.000030463 -0.000021076 0.000016572 0.000000309 0.000003378 -0.000039602 -0.000006724 -0.000003877 -0.000003749 -0.000009593 -0.000009643 -0.000006543 0.000000015 0.000000579 0.000020842 -0.000006591 0.000028688 -0.000016304 0.000005273 0.000236406 0.000161324 -0.000249243 0.000091671 -0.000022388 0.000016946 -0.000003953 0.000027895 -0.000006011 -0.000000356 0.000002381 0.000003151 0.000005924 -0.000009097 0.000004814 0.000002398 -0.000001730 -0.000002232 0.000001686 -0.000002195 0.000008135 0.000012168 -0.000001400 -0.000004991 0.000003589 -0.000001834 -0.000000292 0.000006138 -0.000004462 0.000000091 -0.000005643 0.000003851 0.000005713 -0.000000228 -0.000000087 -0.000000733 -0.000000804 0.000004917 -0.000003450 0.000000135 -0.000003580 -0.000027698 0.000027356 -0.000015472 -0.000000467 -0.000000582 -0.000019621 0.000009991 -0.000005140 -0.000000863 0.000004167 -0.000017351 -0.000003959 -0.000004939 -0.000000410 -0.000018388 0.000232991 -0.000083917 0.000103875 0.000000302 -0.000124351 -0.000033705 0.000124294 -0.000022302 0.000011907 -0.000012678 0.000065413 0.000044878 -0.000034192 0.000012341 0.000015822 -0.000409524 0.000093172 -0.000163493 0.000004952 -0.000011293 0.000046946 0.000006813 0.000010295 0.000001385 0.000039005 -0.000034389 -0.000049631 0.000013502 -0.000001841 -0.000005890 0.000016036 0.000009239 0.000001237 0.000000880 -0.000001597 -0.000008866 0.000008390 -0.000006467 0.000001047 0.000000175 0.000011525 -0.000002289 0.000006527 -0.000001057 -0.000001396 0.000050092 -0.000013814 0.000015012 -0.000000894 -0.000001312 -0.000054667 0.000001885 -0.000015664 -0.000000520 0.000037814 -0.000014217 -0.000015198 -0.000002342 -0.000002796 -0.000011732 0.000025942 0.000003204 0.000005632 -0.000000249 0.000007862 -0.000001258 -0.000010906 0.000000360 -0.000001501 -0.000026088 0.000041479 0.000020256 0.000005438 0.000003414 -0.000007901 0.000011345 0.000007332 0.000002854 0.000001100 -0.000030574 -0.000020359 0.000017413 -0.000009977 0.000002347 0.000000598 0.000022273 -0.000015177 0.000006693 -0.000001495 0.000025547 0.000055438 -0.000018466 0.000006034 0.000001093 -0.000017853 0.000008491 -0.000005348 0.000003445 -0.000001205 -0.000071749 -0.000032325 0.000010784 -0.000017493 0.000003904 -0.000013592 0.000037136 0.000005326 0.000009000 0.000001167 0.000009660 0.000020623 0.000009241 0.000005891 0.000000784 0.000045135 0.000030960 -0.000019796 0.000014466 -0.000003673 -0.000010590 0.000002732 0.000004611 -0.000001608 0.000000639 -0.000009412 -0.000032870 0.000012222 -0.000011056 0.000001834 -0.000000851 0.000003696 0.000007605 0.000002029 0.000001310 0.000003801 -0.000021189 0.000006652 -0.000008943 0.000000018 -0.000004410 0.000000252 0.000007284 -0.000002958 0.000000586 0.000001997 0.000000313 -0.000000505 0.000000361 -0.000000116 0.000074825 -0.000016354 -0.000003329 0.000011015 -0.000007421 0.000129067 0.000074770 -0.000103852 0.000036970 -0.000008467 0.000021160 -0.000024115 0.000024312 -0.000006160 0.000001539 0.000020803 -0.000022963 -0.000011114 -0.000001382 -0.000001148 0.000011541 0.000019271 -0.000002966 0.000004474 -0.000000644 -0.000046210 -0.000006322 0.000028382 -0.000009448 0.000003825 0.000001369 -0.000012078 0.000000574 -0.000004568 0.000000234 -0.000006595 0.000004143 0.000003465 0.000000027 0.000000774 -0.000000458 0.000001618 -0.000001801 0.000001438 -0.000000048 0.000000989 -0.000012384 -0.000003471 -0.000003179 0.000000243 -0.000000576 0.000003119 0.000001673 0.000000897 -0.000000190 0.000005528 -0.000001635 -0.000001319 -0.000000238 -0.000000712 -0.000038282 -0.000031828 0.000056720 0.000031039 -0.000012495 -0.000245917 -0.000144883 0.000298039 -0.000106655 0.000030857 -0.000171264 0.000039710 0.000222519 -0.000067668 0.000030350 0.000009695 0.000029298 -0.000126773 -0.000017815 0.000001045 0.000159042 0.000114382 -0.000150261 0.000090988 -0.000032075 0.000266342 -0.000074996 -0.000362665 0.000131547 -0.000055398 -0.000095806 0.000105545 0.000023636 0.000027614 -0.000018688 -0.000124075 0.000044352 -0.000007719 0.000006548 -0.000002198 -0.000079055 0.000088661 -0.000002296 0.000012352 -0.000003067 -0.000018478 0.000233781 -0.000041492 0.000101637 -0.000004206 0.000012902 -0.000036962 0.000004599 -0.000014111 -0.000000536 -0.000003412 -0.000072637 0.000020551 -0.000034116 0.000002113 0.000034744 -0.000128075 0.000007164 -0.000054847 -0.000000246 0.000048519 -0.000005314 -0.000037627 0.000004684 -0.000008862 -0.000019405 0.000251774 -0.000053081 0.000115918 -0.000006882 -0.000028890 0.000086614 0.000003619 0.000031235 -0.000000434 -0.000016112 -0.000203157 0.000066665 -0.000094927 0.000012902 -0.000007028 -0.000125787 0.000046213 -0.000067870 0.000006981 0.000138300 -0.000095270 -0.000074899 -0.000017494 -0.000010110 0.000046501 0.000233118 -0.000081279 0.000101809 -0.000017895 0.000039843 0.000018670 -0.000028052 0.000019953 -0.000000670 -0.000029492 0.000021215 0.000017724 0.000004058 0.000002841 -0.000001181 -0.000045696 0.000012521 -0.000019360 0.000003861 -0.000012242 0.000004387 0.000007474 -0.000001645 0.000000370 -0.000104129 -0.000000458 0.000055317 -0.000011894 0.000007371 -0.000017039 -0.000059555 0.000023267 -0.000024616 0.000005153 -0.000023214 -0.000000652 0.000010537 -0.000004043 -0.000000243 -0.000037888 0.000013320 0.000022614 0.000000320 0.000003472 -0.000018732 -0.000031651 0.000018647 -0.000015152 0.000003435 -0.000003928 -0.000007804 0.000002003 -0.000004811 -0.000000856 -0.000032016 0.000062321 0.000009820 0.000025059 0.000002721 -0.000047266 0.000069371 0.000017727 0.000028564 0.000005476 0.000019782 -0.000040970 -0.000001605 -0.000020747 -0.000001221 0.000020220 -0.000038938 -0.000007190 -0.000014136 -0.000001612 0.000011066 -0.000013722 -0.000006574 -0.000004300 -0.000001635 -0.000016367 0.000027004 0.000002288 0.000014031 0.000001430 0.000008360 -0.000005223 -0.000004278 -0.000000949 -0.000000445 -0.000007730 0.000015382 -0.000000241 0.000005745 -0.000001237 0.000005995 0.000002145 -0.000005426 0.000001727 -0.000001303 -0.000003567 0.000011656 -0.000002539 0.000004449 -0.000001559 -0.000002352 0.000003749 -0.000000926 0.000001218 -0.000000941 0.000001945 0.000002424 -0.000001427 0.000001410 0.000000014 -0.000002208 -0.000009442 0.000003759 -0.000004566 0.000000744 0.000000388 0.000000418 0.000001152 0.000000154 0.000000669 -0.000006121 -0.000003145 0.000004179 -0.000001997 0.000000577 0.000150668 0.000016519 -0.000067770 0.000021042 -0.000006986 -0.000001112 0.000026758 -0.000010443 0.000008859 -0.000001987 0.000000258 -0.000005199 0.000007781 -0.000001676 0.000000513 0.000011945 -0.000005102 -0.000006446 0.000000141 -0.000000862 0.000000398 0.000011877 -0.000000413 0.000003816 0.000000009 -0.000010590 0.000011475 0.000004409 0.000002024 0.000000197 -0.000011835 0.000003568 0.000005091 0.000000061 -0.000000370 0.000002054 -0.000004625 -0.000001422 -0.000001489 -0.000000369 0.000013104 -0.000010999 -0.000002716 -0.000003023 0.000001308 0.000003201 0.000006853 -0.000003783 0.000003270 -0.000000818 0.000002490 -0.000001119 -0.000001871 -0.000000093 -0.000000372 -0.000000905 -0.000006758 0.000002368 -0.000002859 0.000000703 -0.000007621 -0.000005338 0.000006293 -0.000003462 0.000000995 -0.000005234 0.000002056 0.000003364 0.000000020 0.000000533 0.000006174 0.000003381 -0.000004097 0.000002240 -0.000000453 0.000006104 -0.000006379 -0.000003411 -0.000001207 -0.000000435 0.000001292 0.000002438 -0.000001167 0.000001299 -0.000000085 -0.000004607 0.000008764 0.000001497 0.000002452 -0.000000023 -0.000003352 0.000010906 0.000000387 0.000004065 0.000000023 0.000003129 -0.000002327 -0.000002047 -0.000000446 -0.000000427 0.000001272 0.000000487 -0.000000128 -0.000000564 -0.000000190 0.000002600 -0.000007177 -0.000002259 -0.000001142 -0.000000219 0.000000110 0.000005542 -0.000000948 0.000002028 -0.000000240 0.000001245 -0.000002400 0.000000327 -0.000001764 -0.000000008 0.000000711 -0.000001569 -0.000000308 -0.000000291 -0.000000085 -0.000003303 0.000002711 0.000002029 0.000000851 0.000000457 0.000000233 -0.000002651 0.000000407 -0.000001094 0.000000087 -0.110329285 -0.052492066 0.033949997 -0.000728034 -0.001316136 -0.050512559 -0.199640425 0.039488598 0.000545481 -0.000132576 0.032681709 0.036562037 -0.102545712 -0.002767879 -0.000221434 0.003845009 -0.013930553 -0.008109705 -0.000414411 -0.000734432 -0.010828541 -0.031838242 -0.011965472 -0.000296458 -0.000126895 -0.000342842 0.006236783 0.012855569 0.000842428 0.000034417 0.006580509 -0.000368393 0.000393898 0.000103674 0.000101691 -0.000647437 0.000087813 -0.004231699 -0.000326694 0.000059071 0.001470083 -0.003938933 -0.001723441 -0.000191132 0.000075983 -0.000803889 -0.000321423 0.000374394 0.000019357 0.000010465 -0.000946263 -0.000845965 0.000032874 0.000009497 -0.000001755 0.000856659 -0.000403458 -0.000831889 -0.000133318 0.000105738 0.005473421 -0.000663198 0.002695054 0.000141992 0.000010506 -0.000605036 0.003730726 -0.002308784 0.000085680 -0.000155236 0.002723306 -0.002440109 -0.003927759 -0.000151645 -0.000073682 -0.003835262 -0.008387216 0.017936198 0.000208247 0.000162141 -0.012577645 0.002097897 0.027183250 0.000122519 0.000379906 0.008639364 0.007714391 -0.007700992 0.000127728 -0.000243039 -0.003299241 0.000200012 -0.000788389 -0.000855328 -0.000462496 0.001900958 0.000768498 -0.000844335 -0.000582142 -0.000182017 -0.000757620 0.001499550 -0.000086839 -0.000475520 0.000043697 -0.000077256 -0.000230942 -0.000426981 -0.000058064 -0.000053865 0.000316909 -0.000473703 -0.000755855 -0.000010790 0.000036337 -0.000159630 0.000358910 0.000416201 0.000003109 -0.000028908 -0.000645383 -0.000068477 -0.000590211 -0.000117598 -0.000000531 0.001205724 -0.000265766 0.000037980 -0.000175930 -0.000017834 -0.000520244 -0.000079526 -0.000316832 0.000030665 0.000022475 -0.000230299 0.000453249 0.000361855 -0.000009481 0.000035015 -0.000183610 0.000305192 0.000934474 0.000013427 0.000005169 -0.000036899 -0.000079512 -0.000109663 -0.000004328 0.000006657 -0.002678996 0.002081338 -0.001535473 -0.000028140 -0.000025557 0.000960563 -0.000081964 0.000383446 0.000047462 0.000005906 -0.001990954 -0.000006410 0.000554431 -0.000108565 -0.000009856 0.000082390 -0.000066845 -0.000004219 -0.000015434 0.000010328 -0.000000896 -0.000003596 -0.000002533 -0.000000480 0.000000048 -0.000012708 -0.000002910 0.000009429 -0.000001019 -0.000000130 0.000008738 0.000010704 -0.000006105 0.000007339 -0.000005053 0.000000442 0.000009677 0.000005598 0.000002180 -0.000002003 -0.000017963 0.000020672 -0.000001379 0.000005031 -0.000003066 0.000050700 -0.000074611 0.000014659 -0.000025921 0.000015421 0.000002832 -0.000010641 0.000004561 -0.000004076 0.000002560 0.000000824 0.000000505 -0.000006161 0.000001355 0.000000519 -0.000004934 0.000025863 -0.000017686 0.000012429 -0.000006002 0.000015248 -0.000003137 -0.000010514 -0.000000011 0.000000048 0.000015382 -0.000013402 0.000002422 -0.000004707 0.000001918 0.000032813 -0.000034102 -0.000000618 -0.000015176 0.000008207 0.000022461 -0.000015995 -0.000015171 -0.000002688 0.000002332 0.000007648 -0.000022036 0.000000255 -0.000005263 0.000003666 -0.000009484 0.000010045 0.000000279 0.000003157 -0.000002247 -0.000021717 0.000002666 0.000006767 -0.000000978 0.000000518 0.000015906 -0.000012345 0.000002351 -0.000003578 0.000002092 0.000008560 -0.000003311 -0.000001900 -0.000000338 0.000000263 -0.000007939 0.000005041 0.000003835 0.000001132 0.000000131 0.000000843 -0.000000354 -0.000000569 0.000000314 -0.000000050 -0.000037840 0.000145318 -0.000062510 0.000055840 -0.000031891 -0.000021014 0.000042047 -0.000008030 0.000015748 -0.000006493 0.000033753 -0.000013946 -0.000020042 0.000001358 -0.000001430 0.000005777 -0.000000996 -0.000002085 -0.000000748 0.000000129 -0.000005810 0.000004944 0.000003237 0.000001509 0.000000026 0.000005217 -0.000003697 -0.000003772 -0.000000416 -0.000000164 -0.000006225 0.000009252 -0.000005734 0.000004010 -0.000002651 -0.000017327 0.000006068 0.000016885 -0.000000040 -0.000000625 0.000008751 0.000010560 -0.000019916 0.000006695 -0.000002867 0.000083523 0.000156057 0.000043047 0.000060692 -0.000006050 -0.000050108 0.000239415 0.000006207 0.000092482 0.000003505 0.000161247 0.000263051 0.000162989 -0.000082518 -0.000006465 -0.000050738 0.000210954 0.000069693 0.000068804 0.000004765 -0.000369764 0.000260198 0.000080609 0.000072909 0.000010529 -0.000271806 -0.000005350 0.000345040 -0.000007799 -0.000000057 0.000007975 -0.000052686 0.000029056 -0.000021764 0.000012696 0.000011612 -0.000027393 0.000005507 -0.000010983 0.000004090 -0.000008606 -0.000015232 0.000018708 -0.000009569 0.000005548 0.000018568 -0.000063514 0.000025538 -0.000022950 0.000013471 0.000020217 -0.000027719 -0.000002138 -0.000008793 0.000002337 -0.000029584 0.000037334 0.000002496 0.000009421 -0.000004714 -0.029281903 -0.013137173 0.025901486 0.008727289 0.013710914 -0.045433469 0.032112388 0.027123834 -0.010092154 -0.016954057 0.033666991 0.003295594 -0.015150088 -0.001101376 -0.004584316 -0.033256137 0.025637473 0.014743166 0.000883943 -0.002697544 0.008429540 -0.002912603 -0.005251141 -0.001374102 -0.001883079 0.018712590 -0.019091778 -0.013340236 0.002816642 0.003031378 0.019118900 -0.011054597 -0.007099245 -0.000342691 0.001241459 0.006141621 -0.009901120 -0.001246431 -0.002018122 0.000840470 -0.011010488 0.011326834 0.010779641 -0.001347019 -0.001738794 0.000826751 -0.001477833 -0.000890518 0.000008220 -0.000193884 -0.018328295 0.013967151 0.009848572 0.000482419 0.000143039 0.004623738 -0.003269551 -0.002578546 -0.000196027 0.000118194 0.000214518 -0.000306222 -0.000014145 -0.000259734 -0.001029835 0.000355200 -0.000039032 -0.000289396 0.000356305 0.000145150 -0.000068763 0.000119608 -0.000032492 0.000214773 0.000685796 -0.000211202 -0.000224140 -0.000186309 0.000073228 -0.000005804 -0.000411160 -0.000149253 0.000095334 0.000058300 -0.000014048 -0.000116285 0.000125214 -0.000482656 0.000061751 0.000046944 0.009580621 -0.009788323 -0.005087482 0.000218038 0.001032023 0.008349312 -0.007733957 -0.004737066 -0.000645921 -0.000750650 -0.009451944 0.008807490 0.004165459 0.000009340 -0.000476796 -0.012592261 0.010653226 0.006814256 0.000257165 -0.000057920 0.009875028 -0.008339159 -0.004695902 -0.000245176 0.000102725 0.006184619 -0.005084685 -0.003179221 -0.000209728 -0.000038953 0.000015414 -0.000066278 -0.000126939 0.000010169 -0.000129680 -0.000103430 0.000131141 0.000065361 -0.000102077 -0.000267843 -0.000298445 0.000139146 -0.000019413 0.000194111 0.000241949 -0.000230539 0.000276227 0.000190716 0.000002548 -0.000048496 0.000074670 -0.000031537 -0.000012549 0.000036007 0.000033763 0.000061371 0.000000928 0.000070567 0.000024284 0.000026104 0.000430700 -0.000074606 -0.001140931 -0.000008851 0.000023961 -0.000033151 -0.000186897 0.000975753 -0.000015696 0.000009861 0.000093337 0.000100843 -0.000207596 -0.000005870 0.000018577 -0.000156081 0.000359448 0.000448743 -0.000001935 0.000008237 0.000152084 -0.000006208 0.000224690 -0.000004748 0.000001061 -0.000162810 -0.000232679 0.000143285 0.000009125 -0.000000281 0.000140644 -0.000188113 -0.000120378 0.000003528 -0.000022625 0.000210658 -0.000265521 -0.000190479 -0.000001037 -0.000000830 0.000082206 -0.000054445 0.000093162 0.000003578 -0.000026422 -0.000106150 0.000027422 -0.000012809 0.000003429 0.000013796 0.000007626 0.000064443 0.000006147 0.000000865 0.000012100 -0.000058779 0.000000170 0.000027675 -0.000002652 0.000000349 -0.000108160 -0.000028309 0.000019353 -0.000000891 0.000020354 0.000052065 -0.000109647 0.000026404 0.000001221 0.000000216 -0.000038037 0.000110965 -0.000025558 -0.000000997 0.000034024 -0.000008263 0.000010868 0.000009110 0.000002114 -0.000003575 -0.000007529 0.000006703 0.000010287 -0.000000807 -0.000002741 0.000019173 -0.000005153 -0.000029093 0.000000169 0.000000953 0.000069784 -0.000076449 -0.000148722 0.000000882 -0.000006075 0.000038917 -0.000055657 0.000084046 -0.000002799 -0.000006229 -0.000008754 -0.000013924 0.000009994 0.000000005 -0.000003137 -0.000029553 0.000061756 -0.000000968 -0.000000241 0.000006265 0.000072757 -0.000042123 -0.000035218 0.000001961 -0.000005458 0.000010007 0.000032811 0.000005988 0.000001643 0.000000727 0.000005359 -0.000002075 0.000012799 -0.000002078 0.000001142 -0.000008009 0.000014209 0.000032276 0.000002722 -0.000002766 -0.000013503 -0.000003470 0.000022738 0.000000895 0.000000186 -0.000009468 0.000005547 0.000001939 0.000001274 -0.000000150 -0.000000464 0.000005213 -0.000000586 0.000002487 -0.000004448 -0.000002398 0.000006341 -0.000003068 0.000001378 -0.000000337 -0.000000586 -0.000010789 0.000007010 -0.000009205 0.000001331 -0.000003857 -0.000014189 0.000003115 -0.000003222 0.000000231 0.000009388 -0.000007045 -0.000009380 0.000003258 -0.000002026 0.000000094 -0.000004934 0.000001899 -0.000002763 0.000000194 -0.000004164 -0.000001220 0.000004532 -0.000001649 0.000000814 -0.000000730 -0.000002489 -0.000000054 -0.000000545 -0.000000066 -0.000003848 0.000008642 -0.000000012 0.000003823 -0.000000098 0.000001538 0.000000724 -0.000000074 -0.000000845 -0.000000189 -0.000003640 0.000008559 0.000003633 0.000000514 0.000000604 0.000002321 -0.000007382 -0.000000555 -0.000002539 -0.000000028 0.000000272 0.000007852 -0.000005181 0.000004780 -0.000000659 0.000001094 -0.000001275 0.000000731 -0.000001739 0.000000132 -0.000001141 0.000001153 0.000008727 -0.000003524 0.000001264 0.000014836 0.000004319 0.000004523 0.000002562 -0.000000071 0.000015006 0.000014302 0.000000627 0.000002871 0.000000086 -0.000012739 0.000011275 0.000007757 0.000001300 0.000000437 -0.000006305 -0.000008261 0.000004587 -0.000003227 0.000000160 -0.000008480 0.000010199 0.000002916 0.000002889 -0.000000253 0.000045114 -0.000000803 -0.000021564 0.000006204 -0.000002971 0.000007428 0.000010512 -0.000003320 0.000003173 -0.000000222 -0.000001032 -0.000006425 0.000010205 -0.000004913 0.000001741 0.000001135 -0.000007253 -0.000008857 -0.000001289 0.000000043 0.000004140 -0.000000346 -0.000019648 0.000003790 -0.000001889 0.000009400 -0.000008508 -0.000027475 0.000007447 -0.000003240 0.040936416 0.023918087 0.593292821 -0.027811314 -0.079143172 0.690303243 -0.048167477 -0.270648215 -0.062031844 0.327086758 -0.000199627 -0.028917182 -0.019086124 0.021007346 0.528051031 -0.000151872 -0.021362454 -0.014164485 0.016348960 -0.020185393 -0.000618025 0.023582271 0.015701343 -0.021908237 -0.215752102 0.005118540 -0.023815285 0.022804213 0.014936626 -0.132220600 0.002467303 0.065414995 0.032918557 -0.048255837 -0.031702310 0.004374169 0.004359368 -0.019582896 0.008528595 0.042342156 0.000012565 0.000428041 -0.000272419 -0.000313994 -0.023877628 0.000116635 -0.000112739 -0.000813733 0.000340019 0.026587062 0.000145918 -0.000155744 0.000001026 0.000088954 0.005177045 -0.000352259 -0.000449806 -0.000044881 -0.000475868 -0.129996106 -0.000141453 -0.001065015 -0.000202352 0.000646545 0.055870533 -0.000441659 -0.000148963 0.000167534 -0.000672806 0.012477638 -0.000001616 -0.000309943 -0.000093597 0.000248612 -0.000735337 -0.000007269 -0.000122006 -0.000202803 0.000122643 -0.000903829 -0.000010192 -0.000124946 -0.000113544 0.000085451 -0.000271750 -0.000026839 -0.000157987 -0.000084184 0.000082708 -0.003978426 0.000002486 0.000311263 0.000309154 -0.000299321 -0.000941154 -0.000002016 0.000153399 -0.000074424 -0.000029688 -0.003329724 -0.000000230 -0.000006968 -0.000004363 0.000011520 0.000017503 -0.000001994 0.000007880 -0.000020935 0.000000834 -0.000070703 0.000001153 0.000008362 -0.000000715 -0.000015038 0.000206561 -0.000048394 -0.000604086 0.000291007 0.000521370 0.001675444 -0.000160598 -0.000312863 0.000455606 0.000340679 0.006966574 -0.000011469 0.000656409 0.000608066 -0.000544464 0.001972914 0.001011194 0.003099516 0.006462685 0.000242578 -0.035624188 -0.000933221 -0.000558378 -0.006551241 0.003402248 -0.030086640 -0.000287932 0.001969494 0.000313133 0.003672053 0.025618995 -0.000530298 -0.000286178 -0.002471384 0.001066664 0.006276816 0.000098659 0.001476376 -0.001548580 -0.001931126 -0.005578168 -0.000363412 -0.000372095 -0.001976983 0.000063610 0.009977258 0.000187603 0.000059141 0.000877624 0.000131813 -0.001709382 0.000003266 -0.000330242 0.000284895 0.000307944 0.000959346 -0.000007159 -0.000028203 0.000029637 0.000058567 -0.000980105 0.000127503 0.000567466 0.000247165 -0.000748433 -0.000913143 0.000102495 -0.000510722 0.000706732 0.000655361 -0.001071707 0.000043845 -0.000228573 0.000420234 0.000251620 -0.002354077 -0.000002027 -0.000090109 0.000081240 0.000125378 0.000111296 -0.000070276 -0.000078404 -0.000240841 0.000067794 0.000348302 0.000015020 -0.000002959 0.000055010 0.000019627 0.000003591 -0.000003922 0.000002890 -0.000001672 0.000003412 -0.000000033 -0.000002228 0.000003772 -0.000000565 -0.000004356 -0.000005634 -0.000003604 0.000006581 -0.000010288 -0.000006862 -0.000006088 0.000008425 -0.000004337 0.000003278 -0.000005479 0.000003474 -0.000027511 0.000007687 -0.000020997 0.000003451 0.000001654 0.000000553 0.000001265 0.000010863 0.000006898 -0.000002676 -0.000013935 0.000004802 -0.000002728 0.000003857 -0.000033733 0.000001609 0.000016831 -0.000022011 -0.000034764 -0.000012116 0.000027397 -0.000039963 -0.000001560 0.000004857 0.000074281 0.000014097 -0.000009585 -0.000003533 -0.000013050 0.000007079 0.000023312 0.000012209 0.000040249 -0.000015674 -0.000047765 0.000016149 0.000007922 0.000005794 -0.000002113 -0.000021463 0.000002505 -0.000008181 0.000003910 -0.000001858 0.000009005 0.000011051 0.000008501 0.000020955 0.000002304 -0.000020559 -0.000014214 0.000011628 -0.000019470 -0.000014905 -0.000010620 -0.000007934 0.000010499 -0.000029542 -0.000022846 0.000005173 0.000008906 -0.000006849 0.000018402 0.000019203 0.000011222 0.000003105 -0.000009004 0.000028195 0.000015877 -0.000002583 -0.000007748 0.000005268 0.000013233 0.000021622 -0.000010403 -0.000082646 -0.000139913 -0.000097435 0.000141251 0.000257339 0.000002763 -0.000003320 0.000023006 0.000016710 -0.000014827 -0.000009316 0.000004096 0.000003142 0.000006823 -0.000002531 0.000002600 -0.000003472 0.000005025 0.000002392 0.000005231 -0.000010551 0.000001326 -0.000000369 0.000006692 0.000002595 -0.000001202 0.000003184 -0.000003588 0.000001669 -0.000001409 0.000001503 0.000003530 -0.000004591 -0.000004487 -0.000006168 0.000000718 0.000000277 0.000003079 0.000002770 -0.000002349 0.000010589 -0.000005170 0.000029037 0.000018787 -0.000008470 0.000006401 -0.000003374 0.000014840 0.000006172 -0.000000457 0.000004321 -0.000007994 0.000021304 0.000015411 -0.000000414 -0.000008414 0.000072487 -0.000141231 -0.000182303 -0.000076526 0.000029892 0.000034138 0.000081116 -0.000071222 -0.000163693 -0.000041365 0.000003661 -0.000007857 0.000037471 -0.000008035 0.000014864 -0.000110968 0.000284159 0.000302161 0.000098730 -0.000013775 0.000020486 -0.000043556 -0.000037565 -0.000007283 0.000026578 -0.000000911 0.000032077 -0.000026936 -0.000002207 0.000002902 0.000007439 -0.000000833 -0.000012592 -0.000018504 0.000001293 -0.000001506 0.000012177 0.000007006 -0.000005283 0.000001218 0.000000961 -0.000007593 -0.000006709 -0.000003474 -0.000005146 0.000002241 -0.000025449 -0.000017912 -0.000002338 0.000003421 -0.000007842 0.000030880 0.000022869 0.000020136 0.000000463 -0.000008754 0.000005225 0.000020587 0.000034119 -0.000003993 0.000005594 -0.000018670 -0.000009118 0.000001843 -0.000002280 -0.000002938 0.000000598 0.000001212 0.000016747 -0.000003258 0.000007452 -0.000021597 -0.000015216 -0.000027883 -0.000005503 0.000006865 -0.000013884 -0.000013539 -0.000006107 0.000001692 0.000003139 0.000014511 0.000002029 -0.000029541 -0.000006078 0.000002193 -0.000016168 -0.000008391 0.000015570 -0.000002508 0.000013835 -0.000013983 -0.000011399 -0.000002340 -0.000001357 -0.000009741 0.000001441 0.000012402 0.000009776 0.000004589 0.000000154 0.000031645 0.000010044 -0.000057301 -0.000003162 0.000008939 -0.000024088 -0.000012291 -0.000011432 0.000001256 0.000004835 -0.000014084 -0.000013838 0.000004114 -0.000009128 -0.000000651 -0.000028774 -0.000004301 0.000048869 -0.000000199 0.000001326 0.000001487 -0.000000065 -0.000009736 0.000006522 -0.000001723 0.000028903 0.000009630 -0.000033290 -0.000002863 0.000004700 -0.000010551 -0.000008361 -0.000005737 0.000007711 -0.000007641 0.000028032 0.000020173 -0.000006478 0.000001037 -0.000000083 0.000007381 0.000003899 -0.000008753 0.000001475 -0.000000665 0.000001553 0.000001259 0.000000996 -0.000006038 -0.000026244 -0.000010234 0.000017397 0.000079261 -0.000019923 0.000008686 -0.000102495 -0.000020985 0.000125104 0.000007277 0.000006816 0.000014688 -0.000015355 -0.000001822 0.000001325 -0.000008257 0.000008521 0.000007998 0.000032643 -0.000003305 0.000004586 -0.000015617 -0.000003449 0.000002910 0.000006040 0.000000120 0.000022029 -0.000000672 -0.000054731 0.000004248 -0.000003743 0.000013310 0.000008297 -0.000002300 0.000000529 0.000001468 -0.000000274 -0.000003366 -0.000007680 -0.000001788 0.000000909 -0.000005200 -0.000002950 0.000001769 0.000002955 -0.000003901 0.000009085 0.000004029 -0.000001447 -0.000000352 0.000000437 -0.000001416 -0.000001099 -0.000001887 -0.000001548 -0.000000914 -0.000000645 0.000005262 0.000008180 0.000037559 0.000064593 -0.000037057 -0.000107643 -0.000027777 0.000081336 0.000131930 0.000128479 -0.000120636 -0.000328231 0.000018700 0.000095485 0.000111061 -0.000103775 -0.000341038 -0.000034456 -0.000134672 0.000031244 0.000196404 0.000039359 -0.000028291 -0.000056099 -0.000156727 0.000024098 0.000232058 -0.000031652 -0.000157619 -0.000225897 0.000147037 0.000591665 -0.000007538 0.000093487 -0.000098318 -0.000084314 -0.000416690 0.000007206 0.000054937 -0.000040890 -0.000030104 0.000975380 -0.000000072 0.000081423 -0.000016621 -0.000056015 0.000423786 0.000001587 0.000070554 -0.000161869 -0.000192038 -0.000074198 -0.000002542 -0.000014848 0.000021127 0.000036067 0.000021698 0.000001335 -0.000021411 0.000059283 0.000060490 0.000014349 -0.000006237 -0.000043758 0.000084198 0.000117881 0.000063935 -0.000012290 0.000002070 -0.000028210 0.000010551 0.000054873 0.000006211 0.000083034 -0.000187296 -0.000222908 -0.000080922 -0.000002485 0.000030571 -0.000057762 -0.000069241 -0.000041584 0.000009717 -0.000068970 0.000176746 0.000164299 0.000022714 -0.000006544 -0.000043731 0.000106200 0.000122463 0.000027922 -0.000005041 -0.000040033 0.000020794 0.000084726 0.000142892 -0.000022152 0.000079458 -0.000214643 -0.000168492 0.000003775 0.000008006 -0.000000243 -0.000026307 -0.000028877 0.000016629 0.000001611 0.000007922 -0.000002949 -0.000019942 -0.000030123 0.000003489 -0.000018530 0.000040982 0.000035006 0.000006491 -0.000002112 0.000002591 0.000001737 -0.000000623 -0.000008328 0.000008120 0.000008446 0.000034100 -0.000009244 -0.000090100 0.000007549 -0.000021084 0.000057758 0.000039122 -0.000008249 -0.000001253 0.000004432 0.000005084 0.000002264 -0.000016327 0.000002658 0.000005724 0.000004764 -0.000014026 -0.000036380 0.000004484 -0.000009746 0.000033498 0.000021138 -0.000012099 -0.000001849 0.000000269 0.000006061 0.000008481 0.000001094 0.000006206 0.000021550 -0.000034028 -0.000061482 -0.000047363 0.000015394 0.000023224 -0.000025718 -0.000075594 -0.000071692 -0.000009761 -0.000014863 0.000022810 0.000048547 0.000035806 -0.000002076 -0.000012331 0.000021577 0.000034399 0.000027701 -0.000002708 -0.000003730 0.000004371 0.000012853 0.000014980 0.000007168 0.000008745 -0.000013482 -0.000032896 -0.000026234 -0.000000450 -0.000003227 0.000001157 0.000005501 0.000008381 -0.000000358 0.000008086 -0.000012275 -0.000013024 -0.000009839 -0.000001280 0.000001280 -0.000005813 -0.000000121 0.000005917 -0.000000945 0.000006715 -0.000010986 -0.000008925 -0.000004517 -0.000000660 0.000003059 -0.000004063 -0.000002547 -0.000002005 0.000000022 -0.000000040 -0.000002334 -0.000001872 0.000000889 0.000000538 -0.000003067 0.000008946 0.000007423 -0.000000142 0.000000258 -0.000000815 0.000001082 -0.000000852 -0.000000123 0.000000845 -0.000000481 0.000004479 0.000001749 -0.000005041 -0.000012450 -0.000014484 -0.000053615 0.000003956 0.000129572 -0.000002793 0.000011999 -0.000022729 -0.000017033 0.000001783 0.000001860 -0.000000609 0.000006746 -0.000000922 -0.000000511 -0.000000342 -0.000001971 -0.000000056 0.000003681 0.000012633 -0.000001536 0.000003051 -0.000009093 -0.000006951 -0.000001568 -0.000001166 0.000004416 -0.000005920 -0.000006879 -0.000011011 0.000000010 0.000004419 -0.000001676 -0.000003212 -0.000010447 -0.000000008 -0.000001099 0.000002299 0.000003712 0.000003052 0.000000788 -0.000008404 0.000007800 0.000009372 0.000010432 -0.000000758 0.000002424 -0.000007371 -0.000004775 0.000001472 -0.000000197 -0.000000758 -0.000000050 0.000001477 0.000002304 0.000000845 -0.000002876 0.000006276 0.000004912 -0.000000182 0.000000971 -0.000000960 0.000007477 0.000003242 -0.000005607 0.000000219 0.000001230 0.000000576 -0.000002359 -0.000004550 -0.000000480 0.000000694 -0.000004971 -0.000002267 0.000004800 0.000000299 -0.000002679 0.000002769 0.000004669 0.000005934 -0.000000020 0.000000501 -0.000002440 -0.000002142 0.000000410 -0.000000907 0.000003072 -0.000005474 -0.000005789 -0.000005061 -0.000000244 0.000003508 -0.000007560 -0.000008646 -0.000005189 0.000000119 -0.000000774 0.000000633 0.000002131 0.000002800 -0.000001497 -0.000000040 -0.000001543 0.000001797 0.000002206 0.000001506 -0.000002099 0.000004953 0.000003097 0.000002623 -0.000001100 0.000001763 -0.000004927 -0.000003613 -0.000000306 -0.000001256 -0.000000746 0.000001030 0.000003517 0.000003228 0.000000979 -0.000000465 0.000001460 0.000000769 -0.000000411 0.000000722 0.000000783 -0.000000441 -0.000002932 -0.000004179 0.000000223 -0.000001093 0.000001944 0.000002408 0.000000600 -0.002649963 -0.011812481 -0.026559384 0.016503846 -0.000132225 -0.002084370 -0.009280500 0.003498147 0.009950472 0.003903068 -0.002926627 0.011718397 0.017087745 -0.007015438 0.002561382 -0.000654324 -0.001133668 -0.001710134 0.000148959 0.000495875 -0.000341073 0.002232017 -0.001653513 -0.004212673 0.000135344 0.000662974 0.000874892 0.001410431 -0.001228483 -0.000828991 0.000288169 0.000292959 0.000979971 0.000561078 0.000322357 0.000389850 0.000441041 0.000032163 0.000741472 0.000114007 -0.000555789 0.000246808 0.000303564 -0.000407388 0.000386254 -0.000118823 0.000269460 -0.000463717 -0.000792833 -0.000041054 0.000040375 0.000814991 -0.000769106 -0.001328223 -0.000034083 0.000500575 0.000458139 0.000489500 0.000390571 0.000023674 0.000033166 -0.000119153 0.000729621 0.000150008 0.000061580 -0.000504736 -0.001242709 -0.000126901 0.001342675 0.000047363 -0.000188685 0.000316061 0.001406984 -0.000510804 -0.000050113 0.000662172 0.001786352 -0.001516388 -0.000949499 -0.000596083 0.000628854 0.000770206 -0.004417124 -0.000231693 -0.000009702 -0.000560203 -0.002776484 -0.000139023 0.002338394 0.000682011 -0.000075736 -0.000076057 -0.001403123 -0.000645232 -0.000277965 -0.000252075 -0.000225860 0.000051296 0.000042223 0.000140978 0.000038988 0.000491049 -0.000156387 0.000323003 0.000079895 -0.000024010 -0.000002779 -0.000008508 -0.000026457 0.000024101 -0.000007275 0.000091524 -0.000037370 0.000032175 0.000079767 0.000017285 -0.000046169 0.000006075 -0.000026098 -0.000051021 0.000183753 -0.000323822 0.000397033 0.000612169 -0.000113858 0.000207959 -0.000379299 0.001114790 0.001040431 0.000019706 -0.000000825 0.000176224 -0.000325881 -0.000375065 -0.000018392 -0.000006344 -0.000009230 -0.000156029 -0.000012495 0.000018168 0.000028379 -0.000017442 -0.000251323 0.000076063 0.000025225 -0.000011062 -0.000034271 0.000045122 -0.000033281 -0.000013017 -0.000033278 -0.000427743 -0.000439500 0.000360016 -0.000205807 0.000023353 0.000093510 0.000201589 -0.000118089 -0.000144633 -0.000012854 0.000256982 0.000038174 0.000059169 -0.000121874 0.000003003 -0.000066717 0.000059100 0.000050968 -0.000091324 0.000000935 -0.000003121 0.000000849 0.000001099 -0.000024060 -0.000000259 0.000000811 -0.000000192 -0.000002841 -0.000141834 -0.000003701 0.000009238 -0.000028323 -0.000009257 -0.000016063 -0.000001893 0.000005165 -0.000002362 -0.000006454 -0.000055644 -0.000002468 0.000015723 -0.000016930 -0.000012906 0.000072664 0.000006564 -0.000061344 0.000086879 0.000056306 0.000021355 0.000001762 -0.000008351 0.000014888 0.000007495 0.000019835 0.000001786 -0.000000072 0.000000462 0.000000299 0.000030634 -0.000001449 0.000019445 -0.000035837 -0.000018332 0.000052834 -0.000001200 -0.000005391 0.000001706 0.000006362 0.000009987 -0.000000282 -0.000013260 0.000016238 0.000010166 -0.000004899 -0.000001132 -0.000032600 0.000055283 0.000034107 0.000050663 0.000001482 -0.000012441 0.000001999 0.000014091 -0.000042477 0.000003530 -0.000009649 0.000007836 0.000013431 0.000036345 -0.000001079 0.000010199 -0.000011702 -0.000008187 -0.000009261 0.000000871 0.000003114 -0.000000685 -0.000003739 -0.000004965 0.000000887 -0.000014062 0.000016177 0.000010869 0.000034324 -0.000000135 -0.000004190 0.000002048 0.000002715 -0.000011821 -0.000000069 0.000002247 -0.000001969 -0.000004710 -0.000011395 0.000000257 -0.000000770 -0.000000192 0.000000320 -0.000005117 -0.000020564 0.000103294 -0.000172899 -0.000096334 -0.000016921 -0.000003388 0.000027433 -0.000043219 -0.000032029 -0.000019678 0.000004501 -0.000003617 -0.000007609 0.000005359 0.000031189 -0.000001488 -0.000003503 0.000003816 0.000003492 0.000002473 0.000000367 0.000002390 -0.000001440 -0.000005624 -0.000006698 0.000000243 -0.000001785 -0.000000308 0.000003574 0.000004070 -0.000000715 0.000006110 -0.000012761 -0.000007722 -0.000008749 0.000001299 0.000008904 0.000000436 -0.000012709 -0.000004560 -0.000001698 0.000005851 -0.000020913 -0.000003216 -0.000028961 -0.000071120 0.000063283 -0.000178832 -0.000150986 0.000049386 -0.000047334 0.000056795 -0.000304705 -0.000191086 0.000007636 0.000034211 -0.000164352 0.000224415 0.000388437 -0.000011961 -0.000072820 0.000104230 -0.000269532 -0.000217010 0.000043506 -0.000084951 0.000180835 -0.000473317 -0.000385270 -0.000001689 -0.000046214 0.000099951 -0.000150188 -0.000190544 -0.000013540 0.000007216 -0.000038597 0.000067580 0.000034803 0.000004471 0.000001778 -0.000016748 0.000027819 0.000021526 0.000013557 -0.000000036 -0.000014964 0.000031808 0.000013090 -0.000011000 0.000010288 -0.000043364 0.000070504 0.000039799 0.000009454 0.000001795 -0.000016043 0.000021194 0.000021502 0.000021967 -0.000006435 0.000022365 -0.000026951 -0.000023199 -0.000023259 -0.005414315 -0.115035004 -0.059227154 0.043050135 -0.005716910 0.011856099 -0.035498448 -0.259763584 0.062137906 0.041965333 0.005163471 0.040270570 0.083328680 -0.113482300 0.000677007 0.003464224 0.040935657 0.014827089 -0.025470849 -0.207618977 0.002155313 0.000627887 -0.035825307 0.010642800 0.014652129 0.001836985 -0.024380725 -0.000548597 0.023464164 0.099068923 -0.002303720 -0.029108055 -0.019798110 0.027150170 -0.008618099 0.000386956 -0.035182837 -0.002378156 0.025369606 -0.003740689 -0.001711974 0.031156046 0.014909534 -0.019594544 0.010025183 0.000045276 -0.002910032 0.001687768 0.005622193 -0.003034388 -0.000191509 0.020754990 0.017130070 -0.015889505 0.016575404 -0.000012192 -0.000224228 -0.005256416 0.006660137 -0.003486371 0.000515062 -0.000166088 0.001277981 -0.002257888 -0.000160528 -0.000192543 -0.002050500 0.000700446 0.000339474 -0.000249938 -0.000079030 -0.001630415 -0.001663326 -0.001585382 0.000182039 0.000080061 -0.000210835 0.000335788 0.000212000 -0.000179855 0.000030121 -0.000643861 0.000735948 0.000351675 0.000126747 0.000129556 0.000618009 -0.000399818 -0.000120023 -0.000351591 -0.000448425 -0.009551509 -0.003481817 0.010216211 -0.025286496 0.000411549 -0.002710626 -0.008303272 0.005114469 -0.017942512 0.000083276 0.010526514 0.005628304 -0.003149188 0.025480451 -0.000125507 0.011097869 0.010300337 -0.009850551 0.018450373 0.000002814 -0.009607418 -0.008082207 0.007679017 -0.010029507 -0.000044214 -0.005490558 -0.004967749 0.003988091 -0.006616670 0.000163252 0.000339216 -0.000495578 -0.000094301 -0.000558393 0.000154101 0.000929653 -0.000582587 -0.000534393 0.000855305 0.000031524 -0.000390436 0.000752877 0.000263003 -0.001142367 0.000045169 0.000125111 0.000102195 -0.000633207 0.000373858 -0.000016258 -0.000245870 -0.000056665 -0.000087023 -0.000012079 0.000025225 -0.000373200 -0.000058267 -0.000468889 -0.000021248 0.000066764 -0.000283253 0.000384426 0.000303840 0.015656196 -0.000043995 0.000127188 0.000457323 -0.000378527 -0.004366509 0.000054034 -0.000181440 -0.000135584 0.000091844 -0.000809357 -0.000001994 0.000286154 0.000233975 -0.000310984 -0.000263295 -0.000022810 -0.000022744 -0.000119730 -0.000000090 -0.002491564 -0.000000614 -0.000014343 0.000019517 0.000039681 -0.002682611 -0.000002744 -0.000208521 -0.000157406 0.000216385 -0.001496381 -0.000005597 -0.000166664 -0.000283777 0.000272718 -0.002302526 -0.000003242 -0.000043840 0.000015950 -0.000049649 0.000464603 -0.000000759 0.000070022 -0.000026900 -0.000048070 -0.000161015 0.000007580 0.000037714 0.000087567 -0.000037752 0.000932065 -0.000006090 0.000038274 0.000064681 -0.000031297 0.000411029 0.000011769 0.000017456 0.000125998 -0.000091073 -0.000587498 0.000008253 -0.000045318 -0.000010250 0.000023008 -0.001096788 -0.000000285 0.000064386 0.000018523 -0.000014918 -0.000709517 -0.000003366 0.000018304 -0.000012584 -0.000008583 -0.000029448 -0.000003686 0.000017463 -0.000012911 -0.000002576 0.000005484 0.000001066 0.000000237 -0.000045470 0.000018573 -0.000055775 0.000001471 -0.000075147 -0.000076457 0.000086405 0.000285431 -0.000000391 -0.000060945 -0.000043911 0.000029175 -0.000962731 -0.000000520 -0.000006631 0.000002209 0.000008668 -0.000168479 0.000000021 0.000067250 0.000059023 -0.000044866 0.000648536 -0.000004407 -0.000036904 -0.000080500 0.000061784 -0.000445066 -0.000002685 0.000015050 0.000006150 -0.000016664 0.000064234 -0.000000708 -0.000000160 -0.000002052 0.000000105 -0.000092388 -0.000002679 0.000015185 -0.000018802 -0.000015134 -0.000250953 -0.000000022 0.000004958 0.000004970 -0.000002955 -0.000169671 -0.000000936 0.000008659 -0.000003814 -0.000006983 -0.000024353 -0.000001400 0.000003916 -0.000014110 -0.000001123 -0.000000155 0.000000399 0.000005416 -0.000009608 -0.000001994 -0.000043235 -0.000003424 -0.000003391 0.000009631 0.000014939 0.000003606 0.000004457 -0.000001517 0.000011335 0.000002990 -0.000002974 0.000001623 -0.000003188 -0.000002064 0.000003050 0.000011889 0.000000457 -0.000001117 0.000004582 0.000004148 -0.000000145 0.000000879 0.000000097 0.000003638 0.000000081 -0.000004960 0.000000591 -0.000000537 0.000002644 0.000001004 -0.000000560 -0.000000532 0.000002451 -0.000005077 -0.000006989 -0.000003630 -0.000001235 -0.000000029 -0.000000701 0.000002127 0.000001683 -0.000001948 0.000002483 -0.000004372 -0.000003322 -0.000004458 0.000000708 -0.000002014 0.000004398 0.000005409 0.000003131 -0.000000700 0.000001104 -0.000006648 -0.000005513 0.000001577 -0.000000580 -0.000000725 0.000000942 0.000003118 0.000000829 -0.000003292 -0.000000637 0.000002659 0.000004644 -0.000002555 0.000001095 -0.000001140 -0.000000613 -0.000005299 0.000002638 -0.000002932 0.000008197 -0.000013851 -0.000011194 -0.000002260 0.000000137 0.000008110 -0.000002180 -0.000011490 -0.000017728 0.000003035 0.000001037 0.000008172 0.000001368 -0.000006974 -0.000000143 0.000005439 -0.000006382 -0.000008348 -0.000009060 -0.000003674 -0.000009479 -0.000015703 0.000007017 0.000048152 -0.000001581 0.000005688 -0.000011747 -0.000007509 0.000004917 0.000002186 -0.000000825 0.000012301 0.000000818 -0.000008090 -0.000003001 -0.000007224 0.000000646 0.000013060 0.000016092 -0.000003004 -0.000007839 -0.000008326 0.000007658 0.000020410 -0.000001286 -0.000011919 -0.000010357 0.000013629 0.000035633 0.674801798 -0.087860849 0.328384048 -0.085735941 0.058754583 0.555055798 -0.299656889 0.069214043 -0.020304971 0.683384187 0.107054923 -0.119818812 -0.212947168 -0.092886516 0.325437919 0.016586281 -0.002246501 0.002409454 -0.003805541 -0.003591875 0.004653051 0.005892374 0.010960225 -0.001770084 -0.006350014 -0.003326484 0.009438454 0.005097188 0.000751373 -0.004608748 0.059026942 0.014303034 0.015248252 0.000110642 -0.000108838 -0.189427386 -0.016010532 0.006475589 -0.035184098 -0.001674775 -0.018472168 -0.075735957 -0.006662422 0.011086261 0.009680775 0.000376718 -0.000203423 -0.000858313 0.000352904 0.000214443 0.000178473 0.000253581 0.000422071 0.000391037 0.000020447 0.000620929 -0.000810875 -0.000073202 0.000324777 0.000083714 -0.001183747 -0.001924128 -0.000610574 0.000178752 0.001176487 0.001367448 -0.002248055 -0.000719093 -0.000933554 0.000471947 -0.002184538 0.005349323 0.000472657 -0.001057318 -0.000516118 0.000031203 0.000111429 -0.000069910 0.000005728 0.000046050 -0.000032147 0.000201139 -0.000050726 0.000011835 -0.000026481 0.000202137 -0.000579806 -0.000061021 0.000057099 0.000131673 -0.004067409 -0.001320368 -0.001718236 0.000251336 -0.002502514 -0.005331610 -0.000394252 -0.016744266 0.000616983 0.011257791 0.001356235 -0.004102263 0.009282469 0.000806532 -0.004179616 -0.007285728 0.029155334 -0.218549597 0.003651839 0.107153850 0.004394236 0.019808580 0.007564248 -0.074724032 -0.000531958 0.006756317 -0.010060245 0.104568367 -0.000329795 -0.135952198 0.002549577 -0.005905612 -0.082008796 0.003577072 0.020229983 0.003894301 0.002910700 0.010442791 -0.002791145 -0.003651722 -0.000544223 -0.005908633 -0.024067120 0.002220472 0.027229717 0.000126447 0.001200647 0.007781760 0.001324201 -0.009477264 -0.000659221 -0.000362519 -0.001924918 0.002454284 0.001476253 0.000615619 0.000295565 0.000357968 -0.000126965 -0.000297938 0.000661338 0.000528291 0.009074947 -0.000483840 -0.004962710 -0.000867105 0.001144072 0.009449478 -0.001417580 -0.005194949 -0.000616279 0.002013347 0.012867037 -0.001842263 -0.008889286 0.000024022 -0.000061211 -0.000924263 -0.000070949 0.000396120 0.000072441 -0.000330591 -0.003464067 0.000182195 0.001767941 0.000010812 0.000001179 -0.000030855 -0.000028523 0.000004175 -0.000003230 0.000002179 0.000015102 -0.000005227 -0.000011439 -0.000004273 0.000004461 0.000048150 -0.000000841 -0.000026970 -0.000004679 0.000003658 0.000044439 0.000000571 -0.000023014 0.000007154 -0.000007029 -0.000056680 0.000011058 0.000037535 -0.000026989 0.000008725 0.000052769 0.000016988 -0.000030552 0.000000816 0.000006502 0.000049206 -0.000010366 -0.000033278 -0.000031091 0.000037451 0.000357403 -0.000007901 -0.000189922 0.000008761 0.000000558 0.000068953 0.000006720 -0.000001407 0.000065118 -0.000077410 -0.000780556 0.000042567 0.000443889 0.000007469 -0.000008331 -0.000097148 0.000028104 0.000067223 0.000005832 0.000033368 0.000359473 -0.000051940 -0.000208145 0.000020224 0.000007341 0.000090604 -0.000032180 -0.000050498 0.000007376 -0.000009248 -0.000086086 0.000007933 0.000052019 0.000006903 0.000015119 0.000157133 -0.000027244 -0.000092616 -0.000024058 0.000011846 0.000107917 0.000014398 -0.000057544 0.000004166 -0.000008510 -0.000078535 0.000032197 0.000057367 0.000017435 -0.000009679 -0.000085072 -0.000016043 0.000050839 0.000000477 0.000004083 0.000058336 -0.000007594 -0.000033359 -0.000008814 0.000010455 0.000086138 -0.000026723 -0.000077381 -0.000029119 -0.000165937 -0.001955523 0.000211920 0.001059059 -0.000017818 0.000021573 0.000116894 -0.000026787 -0.000103729 -0.000011283 0.000006805 0.000057786 -0.000008974 -0.000038991 0.000001765 -0.000002711 -0.000029673 0.000003196 0.000015305 -0.000008520 0.000002033 0.000019073 0.000002059 -0.000012928 -0.000002109 0.000002369 0.000017462 -0.000004975 -0.000012442 -0.000001606 0.000003397 0.000040994 -0.000001809 -0.000021798 -0.000001499 0.000002701 0.000028064 -0.000004043 -0.000017501 0.000000629 0.000008853 0.000085657 -0.000026963 -0.000059716 0.000006920 -0.000000904 -0.000000120 -0.000010261 -0.000002309 0.000000906 0.000003503 0.000022468 -0.000013170 -0.000022081 0.000049818 0.000021673 0.000537162 0.000152327 -0.000081593 -0.000008292 0.000157848 0.001731857 -0.000033621 -0.000782023 -0.000070626 0.000025041 0.000195678 -0.000017637 -0.000155967 -0.000087260 -0.000019193 -0.000470156 -0.000245364 0.000004253 0.000001626 -0.000001166 0.000044204 0.000032957 0.000020793 0.000021873 0.000005679 0.000190504 0.000008489 -0.000044567 0.000004319 0.000014197 0.000162789 0.000001301 -0.000071501 -0.000005258 0.000007195 0.000063687 -0.000009355 -0.000041735 0.000005894 -0.000001068 -0.000013484 0.000005774 0.000008949 0.000006373 -0.000004428 -0.000006407 0.000024546 0.000011764 -0.000004579 -0.000004346 -0.000071740 -0.000017221 0.000011684 0.000010617 -0.000021329 -0.000169374 -0.000006668 0.000110628 0.000004251 -0.000003279 -0.000016588 0.000014284 0.000015069 0.000002445 -0.000007977 -0.000065818 -0.000000738 0.000040277 -0.000014608 0.000016206 0.000122779 0.000005339 -0.000062565 -0.000004344 0.000002254 0.000012682 0.000007468 -0.000005028 -0.000009953 0.000019582 0.000158961 -0.000017267 -0.000098514 0.000006771 -0.000010848 -0.000079924 0.000015879 0.000047089 0.000006186 0.000017133 0.000105650 0.000004776 -0.000056737 -0.000018288 -0.000012964 -0.000089233 0.000028814 0.000021567 -0.000019907 0.000044401 0.000312059 -0.000044356 -0.000212886 0.000001220 0.000000060 0.000041097 0.000026072 -0.000016254 0.000005954 -0.000002498 -0.000008643 0.000026824 -0.000005156 0.000019249 -0.000033040 -0.000302868 0.000033879 0.000170254 -0.000002453 0.000004277 0.000055064 -0.000004302 -0.000030672 -0.000008000 0.000021407 0.000188101 -0.000025996 -0.000109770 -0.000006029 0.000002168 0.000002383 0.000004441 0.000000320 -0.000000939 0.000009033 0.000071844 -0.000019869 -0.000055130 -0.000002414 0.000007440 0.000060563 -0.000006103 -0.000040054 0.000000023 0.000000182 0.000001137 -0.000001018 0.000000013 0.000003364 -0.000075698 -0.000501626 0.000069646 0.000313731 0.000056041 -0.000095607 -0.000701454 0.000067988 0.000564585 0.000012110 0.000013333 0.000093000 -0.000010499 -0.000083539 0.000001379 -0.000014605 -0.000161134 0.000009021 0.000064384 0.000008209 -0.000004614 -0.000042216 0.000004396 0.000034800 -0.000021662 0.000036380 0.000304087 -0.000030607 -0.000184245 -0.000001836 0.000005125 0.000032363 -0.000010732 -0.000024181 -0.000003499 0.000005937 0.000047036 -0.000001373 -0.000026473 0.000000842 -0.000003250 -0.000022481 0.000003546 0.000016243 -0.000002755 0.000003028 0.000015047 -0.000006974 -0.000010606 0.000002275 -0.000000255 0.000003404 0.000002741 -0.000001395 0.000002719 -0.000006825 -0.000049289 0.000000626 0.000027344 0.000098188 -0.000037491 -0.000146438 0.000028212 0.000128665 -0.000010870 0.000239269 0.002552070 -0.000299564 -0.001431905 -0.000059142 0.000263441 0.002625080 -0.000190312 -0.001495672 -0.000136552 0.000107222 0.000158400 -0.000020526 -0.000143815 0.000059665 -0.000163885 -0.002199662 0.000264825 0.001202754 0.000115826 -0.000470085 -0.004783198 0.000353139 0.002741656 0.000225559 -0.000192998 0.000383562 0.000036864 -0.000207080 0.000362114 0.000393125 0.000506042 0.000005478 -0.000393737 0.000267004 0.000133605 0.000040403 -0.000079456 -0.000101159 0.000066368 0.000021265 0.000359258 0.000145459 -0.000044459 -0.000008380 -0.000011420 -0.000157067 -0.000019193 0.000057892 -0.000025621 0.000002489 -0.000049961 -0.000045469 -0.000039081 -0.000024456 -0.000028818 -0.000355292 -0.000074404 0.000118667 0.000069582 -0.000037945 -0.000404282 0.000016850 0.000265788 0.000098034 0.000021054 0.000377942 0.000163574 -0.000015544 0.000024971 0.000019642 0.000204719 0.000049414 -0.000073081 -0.000137804 0.000014665 0.000044692 -0.000146103 -0.000207386 -0.000075925 0.000001803 -0.000088272 -0.000094200 -0.000076259 0.000043845 -0.000087242 -0.000826913 -0.000044206 0.000512540 0.000188062 -0.000032411 -0.000219776 0.000158021 0.000355196 -0.000000486 -0.000024970 -0.000074671 0.000010645 0.000123426 -0.000017361 0.000021016 0.000189165 0.000005954 -0.000118426 -0.000045016 -0.000000047 0.000002857 -0.000032837 -0.000039019 -0.000001173 0.000007898 0.000049724 0.000000838 -0.000040802 -0.000035344 0.000063703 0.000513945 0.000009399 -0.000396652 -0.000054269 0.000012525 0.000096806 -0.000054146 -0.000127405 0.000012507 0.000016332 0.000083257 0.000000086 -0.000084679 -0.000020497 0.000023747 0.000215699 0.000003586 -0.000148141 -0.000030871 0.000012189 0.000098267 -0.000022093 -0.000099240 0.000008157 0.000003625 -0.000012564 -0.000001518 -0.000008173 -0.000008478 0.000024679 0.000292627 0.000031434 -0.000134852 -0.000027297 0.000042027 0.000483903 0.000029222 -0.000245440 -0.000001721 -0.000017652 -0.000226322 -0.000022643 0.000098669 0.000004357 -0.000013853 -0.000162973 -0.000018270 0.000075512 0.000009507 -0.000009031 -0.000100195 -0.000003038 0.000054147 -0.000005218 0.000012242 0.000163196 0.000014787 -0.000075551 0.000000900 -0.000005847 -0.000052548 -0.000002712 0.000032160 0.000018896 0.000005372 0.000042210 0.000011156 -0.000017175 0.000011493 -0.000003972 -0.000046094 0.000003611 0.000032211 0.000020123 0.000002967 0.000011252 0.000009854 -0.000000312 0.000011393 0.000001701 0.000002513 0.000004202 -0.000001088 -0.000000824 -0.000001419 -0.000007457 0.000001476 0.000007994 -0.000007728 0.000001725 0.000009736 -0.000006678 -0.000015604 -0.000007831 -0.000000232 0.000007539 -0.000001060 -0.000003269 -0.000003598 0.000004004 0.000032004 -0.000002560 -0.000025761 0.000014846 -0.000085856 -0.000675830 -0.000002759 0.000551012 0.000022211 0.000000398 -0.000000039 0.000035985 0.000047029 -0.000007311 -0.000001721 -0.000001682 -0.000000636 -0.000013580 0.000002701 -0.000008815 -0.000079050 0.000000510 0.000044054 0.000000666 -0.000001748 -0.000011165 0.000008519 0.000009682 0.000003209 0.000006965 0.000062611 0.000003604 -0.000030117 0.000010341 0.000007527 0.000040286 0.000011536 -0.000034248 0.000003512 -0.000000714 -0.000017209 -0.000001950 0.000007977 -0.000020945 -0.000010073 -0.000051369 -0.000013586 0.000033302 0.000007941 -0.000002000 -0.000017924 0.000005329 0.000018484 0.000003329 -0.000002008 -0.000014367 -0.000000856 0.000009847 -0.000006981 0.000000043 0.000005565 -0.000004887 -0.000009294 -0.000008000 0.000005932 0.000039939 -0.000003947 -0.000035317 -0.000003968 0.000003980 0.000028944 0.000001103 -0.000020366 0.000002665 -0.000003879 -0.000027089 0.000001922 0.000025332 0.000001712 -0.000004278 -0.000033018 -0.000003015 0.000020230 0.000000741 -0.000000877 -0.000006678 0.000002166 0.000006452 0.000002617 0.000002191 0.000022502 0.000004738 -0.000010677 0.000001880 0.000001678 0.000025199 0.000006096 -0.000008062 0.000003244 -0.000001730 -0.000017866 -0.000000901 0.000010940 0.000001538 -0.000001804 -0.000019332 0.000000308 0.000011013 0.000000156 -0.000001244 -0.000009045 -0.000002693 0.000003452 0.000002755 -0.000000875 -0.000004523 0.000003740 0.000006508 -0.000000581 -0.000000787 -0.000020305 -0.000001296 0.000008510 0.000000938 0.000000391 0.000005242 -0.000001315 -0.000002823 -0.000003045 0.000002391 0.000028045 0.000000570 -0.000015841 -0.000001109 -0.000000351 -0.000003461 -0.000001845 0.000000023 0.004054041 0.001487282 0.013306652 0.006219200 -0.007929819 -0.000524160 -0.001210147 -0.008435425 -0.032672636 0.006093815 -0.001445879 0.003097163 -0.003891748 0.000141476 0.008207174 -0.000391238 0.000074487 -0.003249811 -0.000644195 0.002093485 -0.001031223 0.000531242 -0.005153325 0.001448886 0.002831038 0.000094094 -0.000130017 0.001262874 0.002669422 -0.000968864 -0.000033934 -0.000295843 0.000254151 -0.001245242 -0.000546573 0.000069202 0.000365812 0.000721907 -0.000330580 -0.000790421 -0.000196261 -0.000222778 -0.001686978 -0.000535610 0.001283087 -0.000051079 -0.000050167 -0.000615521 0.000432211 0.000701285 -0.000077818 -0.000034843 -0.000649615 0.000775958 0.001291075 0.000065533 0.000221906 0.001361905 -0.000206937 -0.000777331 0.000031269 -0.000385560 -0.001380741 -0.000914442 0.000532424 0.000074379 -0.000154023 -0.000215728 -0.000597410 -0.001061784 0.000126239 -0.000086343 0.000674464 -0.000576312 -0.000212214 -0.000594635 0.000083604 -0.001703065 0.002441433 0.001058045 0.000252415 -0.000269488 -0.000813604 0.000373867 0.001822335 0.000132270 -0.000332529 -0.001660600 -0.002237884 0.000472552 -0.000046605 0.000282872 0.000479525 0.000737661 -0.000228861 0.000108995 -0.000195318 0.000268805 -0.000425438 -0.000141932 0.000119721 -0.000070506 0.000321794 -0.000187962 0.000107229 -0.000004697 0.000018578 0.000009184 -0.000094172 -0.000019542 -0.000038409 -0.000005318 -0.000320920 -0.000093339 0.000207144 0.000022636 -0.000000740 0.000163180 0.000065186 -0.000135181 0.000009797 0.000217346 0.001071357 -0.000223409 -0.000959307 0.000142842 0.000081061 0.001220666 -0.000828088 -0.001363670 -0.000051923 0.000010094 -0.000232467 0.000285000 0.000392426 -0.000002479 -0.000022758 0.000002529 0.000011499 -0.000055121 -0.000005282 -0.000030052 -0.000281503 0.000071342 0.000125814 -0.000000381 0.000007638 0.000115817 -0.000012866 -0.000084778 -0.000075972 0.000293457 0.001315946 0.000216145 -0.000476787 -0.000061133 -0.000168031 -0.000365502 -0.000240026 0.000689365 0.000156549 0.000131260 0.001763293 0.000676330 -0.001822691 -0.000233691 -0.000177585 -0.000313911 0.000002148 0.000234776 -0.000019870 0.000014309 -0.000041195 -0.000007913 0.000021608 -0.000044876 -0.000014256 0.000114474 -0.000002207 -0.000076021 0.000063491 -0.000011302 -0.000005131 0.000015126 0.000013254 0.000029164 -0.000082085 -0.000034182 0.000009526 0.000013110 0.000080580 0.000035847 0.000044456 0.000012336 -0.000052281 -0.000241944 -0.000028407 -0.000132801 -0.000075160 0.000067774 -0.000029098 0.000000401 0.000004123 -0.000011733 -0.000007358 0.000009703 -0.000019572 -0.000040345 0.000008829 0.000041069 0.000120400 -0.000029156 -0.000067537 0.000045433 0.000066974 -0.000013495 -0.000030816 -0.000137594 0.000001645 0.000086781 -0.000058596 0.000010761 -0.000046596 -0.000005271 0.000015980 -0.000170244 -0.000019443 -0.000181200 -0.000043142 0.000091262 -0.000034655 0.000061560 -0.000083352 -0.000036241 0.000063739 -0.000057998 0.000069021 0.000094546 -0.000040192 0.000007554 0.000051691 -0.000026603 0.000030108 0.000007030 -0.000012769 0.000001585 0.000039671 0.000139422 -0.000000330 -0.000077848 -0.000024692 -0.000036268 -0.000076685 0.000008005 0.000032662 -0.000015477 -0.000011846 -0.000038446 0.000000303 0.000027185 -0.000001113 0.000006179 0.000045545 0.000005001 -0.000029884 -0.000001380 -0.000001167 -0.000004176 0.000000216 0.000003505 0.000423659 0.000025730 -0.000103070 0.000147603 0.000121801 0.000081403 0.000029716 0.000063869 0.000039534 -0.000021814 0.000020607 -0.000020820 -0.000188582 -0.000001431 0.000126027 -0.000011745 -0.000006491 -0.000037689 0.000001230 0.000021240 0.000002248 -0.000000690 0.000038546 0.000003451 -0.000021797 0.000001481 -0.000002856 -0.000035374 -0.000002643 0.000023377 0.000048330 -0.000015091 0.000039409 0.000012194 -0.000006598 -0.000008736 0.000009095 0.000145373 0.000005380 -0.000084994 0.000063073 -0.000038137 -0.000181196 0.000019770 0.000107142 0.000003055 -0.000074821 -0.000451142 0.000095168 0.000351345 -0.000039884 -0.000037280 -0.000326228 0.000178464 0.000289603 0.000050649 0.000039681 0.000457214 -0.000218329 -0.000517955 -0.000009547 -0.000060259 -0.000475096 0.000194085 0.000368414 -0.000051912 -0.000032564 -0.000397138 0.000335982 0.000425601 -0.000013473 -0.000014440 -0.000139773 0.000163407 0.000165746 -0.000163055 -0.000009425 0.000080068 -0.000055521 -0.000073850 -0.000052703 -0.000010015 -0.000036891 -0.000023965 0.000007840 -0.000079398 0.000004781 0.000090377 -0.000020918 -0.000070695 -0.000173610 -0.000014384 0.000043114 -0.000063066 -0.000046600 -0.000033375 -0.000015418 -0.000083691 -0.000021913 0.000044972 0.000065688 0.000015122 0.000101843 0.000031033 -0.000062057 0.029815107 0.000615508 0.001862090 -0.019318733 -0.000781477 0.021911454 -0.032332076 0.003488440 -0.053142559 0.007801602 -0.024035912 0.012864293 -0.005418343 0.022170395 -0.007027429 0.031036430 0.090280804 -0.010422867 -0.061273266 0.024234942 -0.113094546 -0.000622106 -0.024028789 0.012287002 0.013348582 -0.013610943 -0.132688610 0.014376664 0.041567312 -0.016761302 -0.003880271 0.010795532 -0.003095582 0.019722652 -0.002597297 -0.008638318 0.006075416 -0.000477557 0.008510654 -0.001513605 0.006328279 -0.003819735 0.001967002 -0.015720559 0.001507343 -0.001843734 0.001586228 0.000776960 0.002991075 -0.000677993 0.008522194 -0.014258294 0.002452617 -0.025734559 0.004025593 -0.001574292 0.002630947 -0.001031471 0.005927014 -0.000301131 0.001229839 -0.000079721 0.000142397 0.000179516 -0.000230440 -0.000052991 0.000242675 -0.000264090 0.000331462 0.000054613 -0.000813678 0.000165999 -0.000126917 -0.000078486 -0.000035603 -0.000099443 -0.000364276 0.000110323 -0.000047276 -0.000001246 0.000226499 -0.000388371 0.000130390 -0.000422636 0.000033015 -0.000167799 -0.000494002 -0.000094208 0.000054978 0.000121787 -0.032038501 0.030754963 -0.001553165 0.022245618 0.000175351 0.002431386 0.012860914 0.001352888 0.016511563 -0.003043032 0.023390923 -0.020878278 0.004138675 -0.019414377 0.006420098 0.007459427 -0.011585053 0.001601468 -0.021031395 0.003777253 -0.010051811 0.012299717 -0.001572877 0.015207044 -0.002367133 -0.000686357 0.009922390 -0.000124775 0.010649584 -0.001955667 -0.000331682 -0.001122306 -0.000032465 -0.000015255 -0.000176983 0.000059600 -0.001274548 0.000114704 -0.000317425 -0.000129259 -0.000302728 -0.001758140 -0.000346303 -0.000459566 0.000117335 -0.001027185 0.000164907 -0.000311905 -0.000251843 -0.000164137 0.000061134 0.000025766 0.000002739 0.000127309 -0.000216467 0.000843482 -0.000067140 -0.000209545 -0.000225015 -0.000471127 0.009344412 0.005569858 -0.003458565 0.003222137 0.000844600 -0.028912529 -0.010183737 0.004782398 0.000695246 -0.002706547 -0.003981898 0.001610103 0.000637161 0.000545549 -0.000468250 -0.004435964 -0.002685500 0.001163882 -0.000134996 -0.000383671 -0.000073316 -0.002357562 0.000056005 -0.000325713 -0.000118442 -0.002708075 0.003282257 0.000592804 -0.000695387 -0.000417901 0.002213829 0.000663035 -0.000138000 0.000342723 -0.000297805 0.001135397 0.000225763 -0.000507176 0.000451673 0.000219456 0.001750222 -0.002068063 -0.000350424 0.000230814 0.000064099 0.000815367 0.000308742 0.000055022 -0.000314686 0.000220851 -0.001402240 -0.000228131 0.000187639 0.000134285 -0.000093234 -0.000172283 0.000168909 0.000073405 -0.000152714 0.000008345 -0.000441334 -0.000158477 -0.000250968 -0.000452227 0.000362172 -0.000867195 -0.000755702 -0.000107350 0.000065239 -0.000008611 -0.000535297 -0.000362684 -0.000131858 -0.000054127 0.000223718 0.000099761 -0.000067851 0.000006892 0.000000026 -0.000021090 0.000120242 -0.000033962 -0.000003664 -0.000013648 -0.000020046 -0.000032581 0.000218367 0.000014170 0.000007092 0.000002790 0.001528659 0.000453004 -0.000482360 0.000224606 0.000228367 -0.000177460 -0.000391123 0.000424499 0.000059532 -0.000277791 0.000057911 0.000071112 0.000072893 0.000052937 -0.000087216 -0.000826653 0.000035810 -0.000039116 -0.000052801 0.000039364 0.000431643 -0.000004782 -0.000262434 0.000111914 0.000042787 0.000129288 -0.000286456 -0.000141787 0.000036181 0.000025545 -0.000065142 -0.000118969 0.000021660 -0.000019141 -0.000008152 -0.000148311 -0.000191951 0.000138730 -0.000017336 -0.000081589 -0.000178575 0.000139087 0.000043123 -0.000048679 -0.000025858 0.000010160 0.000004462 0.000003779 -0.000026959 0.000012918 0.000018969 -0.000010462 0.000067962 0.000037407 -0.000048291 -0.000001312 -0.000027073 0.000009145 0.000006612 -0.000004683 -0.000009683 0.000001077 -0.000010300 -0.000009513 -0.000008746 -0.000002404 0.000004240 0.000033361 -0.000006182 -0.000027100 0.000009174 -0.000010268 -0.000103414 0.000001628 0.000062521 -0.000001224 0.000001163 0.000009144 -0.000004129 -0.000008603 -0.000004789 0.000004142 0.000041589 -0.000002914 -0.000027412 0.000000262 0.000000698 0.000005189 -0.000000408 -0.000004933 0.000000154 0.000001051 0.000015608 0.000005810 -0.000005548 0.000001696 -0.000000772 -0.000012827 -0.000000131 0.000006747 -0.000001904 0.000002584 0.000026822 0.000002140 -0.000014298 0.000000499 -0.000001159 -0.000014691 -0.000004116 0.000005765 0.000003809 -0.000002421 -0.000022389 0.000007873 0.000018959 -0.000000233 -0.000000283 -0.000003188 -0.000001759 0.000000943 -0.000006044 -0.000000528 0.000011713 0.000004429 -0.000011065 -0.000002056 -0.000002936 0.000010678 -0.000001540 0.000000744 0.000006643 0.000000618 0.000051317 0.000002479 -0.000005317 0.000005244 0.000013946 0.000131197 0.000006150 -0.000070599 0.000003337 0.000007328 0.000055840 -0.000003087 -0.000038894 0.000008490 0.000005449 0.000041967 0.000007744 -0.000024131 0.000007963 -0.000023463 -0.000298017 -0.000013088 0.000174284 0.000010634 0.000003949 0.000000483 -0.000000995 0.000013847 -0.000014197 0.000006503 0.000106192 -0.000009503 -0.000055017 -0.000006801 -0.000007369 -0.000104550 -0.000000622 0.000051013 0.000004593 -0.000014531 -0.000178906 0.000006731 0.000101908 0.000006790 -0.000025376 -0.000292270 0.000004544 0.000169279 0.703022302 -0.020141597 0.618005741 0.097254083 0.136631489 0.241862573 -0.348189424 -0.015300183 -0.068824256 0.689524263 0.047350361 -0.118363863 -0.002775371 -0.026739639 0.599272847 -0.047033429 -0.020457489 -0.085525410 0.100774878 0.132749665 0.065404501 -0.018401745 0.005862994 -0.040802300 -0.022277623 0.030023404 -0.051492020 -0.012941384 -0.025058514 -0.013439171 0.023314325 -0.024895913 0.003672602 -0.017007897 -0.008466981 -0.183630205 0.112753395 0.014117642 -0.031768551 0.019905399 0.046865341 -0.193407285 -0.038754629 0.061689901 0.029263106 -0.003102699 -0.030025052 -0.082136042 0.015663160 0.011735691 -0.000611137 -0.001335907 -0.001930304 -0.000436999 -0.000893835 -0.002818568 -0.000392519 -0.003352053 -0.000888391 -0.000129879 -0.003162250 -0.002785657 0.006558531 0.000436235 0.000372560 -0.111801077 -0.071215077 -0.042524106 -0.024564193 -0.044398726 -0.077053196 -0.213047467 -0.078034500 -0.019865613 -0.017818809 -0.042455272 -0.076403911 -0.102248507 -0.011562889 -0.010747496 -0.008363683 -0.017263238 -0.007087828 -0.003673513 0.008781621 0.002979844 0.004866097 0.006142080 -0.002326638 -0.000736851 -0.004066099 -0.006435615 -0.001691188 -0.002088403 -0.003116612 -0.008268734 -0.013449332 0.004767354 0.001756568 -0.006328525 -0.030731592 -0.073853697 -0.007070456 0.004997935 0.007451180 0.016366021 0.031707960 0.021189968 -0.004447738 -0.009184683 0.003465177 0.007730663 0.002496887 -0.000961795 -0.000467515 0.003620120 0.006764738 0.002175125 0.000117359 -0.001151843 -0.003796968 -0.011083826 -0.006107798 0.001570860 0.001943753 0.002718771 -0.000896496 0.000786646 -0.000225840 0.000736238 0.008329668 0.009203694 0.008673395 -0.000853610 -0.002135787 -0.000387488 0.000746955 0.000231820 -0.000298550 0.000830640 -0.000466312 -0.000808224 -0.000636360 0.000162162 0.000132799 -0.001729475 -0.002434971 -0.001686048 0.000327720 0.000423576 -0.000037178 -0.000036972 0.000008767 0.000032505 -0.000017539 -0.000000410 -0.000006383 -0.000003653 0.000004616 -0.000003905 0.000021466 0.000039540 0.000017599 -0.000006435 -0.000005952 0.000022092 0.000040470 0.000018528 -0.000007629 -0.000005389 -0.000011998 -0.000011851 -0.000003691 -0.000002793 0.000009344 -0.000027652 -0.000084457 -0.000028550 0.000009344 -0.000001693 0.000009696 0.000009004 0.000004593 0.000003144 -0.000006328 0.000150130 0.000194344 0.000124253 -0.000029412 -0.000043386 0.000140067 0.000286912 0.000115373 -0.000051882 -0.000022514 -0.000294057 -0.000408602 -0.000258705 0.000052462 0.000091947 -0.000028601 -0.000039730 -0.000018978 -0.000005876 0.000017505 0.000203269 0.000407198 0.000171770 -0.000053283 -0.000048038 0.000101353 0.000222726 0.000096383 -0.000024428 -0.000019347 -0.000020652 -0.000022748 -0.000014279 -0.000003894 0.000012109 0.000088214 0.000166644 0.000076898 -0.000011469 -0.000026192 0.000026872 0.000034569 0.000019235 -0.000010151 -0.000010150 -0.000016199 -0.000005698 0.000000721 -0.000013202 0.000014688 -0.000034261 -0.000061833 -0.000025439 0.000015575 0.000010123 0.000014933 -0.000004062 0.000016337 0.000003346 -0.000004123 0.000033195 0.000066237 0.000027034 0.000000896 -0.000011927 -0.001171299 -0.002290729 -0.001002628 0.000293390 0.000294832 -0.000039897 -0.000096394 -0.000032504 0.000013208 0.000011069 0.000015330 0.000018013 0.000006152 0.000003141 -0.000011326 -0.000021761 -0.000045893 -0.000019452 0.000005648 0.000005495 -0.000014487 -0.000039326 -0.000015752 0.000007229 -0.000001587 0.000001774 -0.000000402 -0.000001604 0.000003487 -0.000003748 0.000022337 0.000039783 0.000019165 -0.000006338 -0.000005078 0.000006765 0.000006351 0.000004511 0.000001461 -0.000003775 0.000022730 0.000025364 0.000010797 0.000010026 -0.000014959 0.000001634 0.000006042 -0.000000127 0.000004753 -0.000003130 0.000003020 -0.000000617 -0.000001294 0.000006941 -0.000004897 0.000512386 0.000885710 0.000686987 -0.000223436 -0.000053444 0.001008412 0.001348782 0.000996547 -0.000206219 -0.000209494 -0.000001659 -0.000107581 -0.000096342 0.000028753 -0.000017299 -0.000535428 -0.001090200 -0.000751495 0.000315173 -0.000006590 0.000032416 0.000044570 0.000075721 -0.000021590 0.000000069 0.000234052 0.000287487 0.000245226 -0.000054139 -0.000048239 0.000088654 0.000136897 0.000100717 -0.000023633 -0.000017504 0.000023908 0.000025035 0.000017043 0.000000638 -0.000009796 -0.000003647 0.000019940 0.000003580 -0.000005997 0.000006725 0.000029312 0.000072815 0.000055665 -0.000023703 0.000002105 -0.000015234 -0.000037964 -0.000029483 0.000022550 -0.000014113 -0.000130580 -0.000277516 -0.000116567 0.000038512 0.000020442 -0.000017424 -0.000013808 -0.000006359 -0.000003431 0.000008529 -0.000022083 -0.000050185 -0.000020801 0.000009297 0.000000190 0.000025509 0.000080098 0.000029571 -0.000022105 0.000002718 0.000001718 0.000022857 0.000004726 -0.000008495 0.000002875 0.000036076 0.000094150 0.000032807 -0.000006186 -0.000011567 -0.000008642 -0.000012219 -0.000000349 -0.000000198 0.000004954 0.000072307 0.000098758 0.000028960 -0.000022667 -0.000016964 0.000030478 0.000057935 0.000006309 0.000009579 0.000003195 0.000130435 0.000301588 0.000126537 -0.000029124 -0.000040778 0.000015173 0.000042330 0.000030519 -0.000017847 0.000008528 0.000089852 0.000138905 0.000074148 -0.000027333 -0.000011462 -0.000084563 -0.000193401 -0.000072020 0.000016050 0.000025157 0.000020118 0.000045231 0.000018598 -0.000006552 -0.000004115 0.000046459 0.000103417 0.000043144 -0.000005316 -0.000013877 -0.000009589 -0.000009679 -0.000010696 -0.000003136 0.000004293 0.000018580 0.000024808 0.000010899 0.000007237 -0.000011059 0.000019196 0.000040999 0.000016768 -0.000002533 -0.000005512 -0.000000558 -0.000006280 -0.000002235 0.000000645 -0.000000353 -0.000218944 -0.000379502 -0.000151219 0.000067735 0.000056594 -0.000437023 -0.000909105 -0.000375740 0.000076682 0.000108113 0.000025270 0.000074804 0.000038147 -0.000013077 -0.000019831 -0.000013687 -0.000064719 -0.000024138 0.000013126 -0.000005454 -0.000049339 -0.000100854 -0.000038975 0.000004265 0.000019160 0.000138949 0.000331102 0.000117911 -0.000035229 -0.000032533 0.000009921 0.000009042 0.000003720 0.000003593 -0.000006201 0.000019021 0.000038734 0.000017239 -0.000006725 -0.000003627 -0.000010796 -0.000015843 -0.000008098 0.000000633 0.000003863 0.000012088 0.000013791 0.000006044 0.000001913 -0.000004971 0.000009829 0.000021989 0.000012804 -0.000003915 0.000000179 -0.000035458 -0.000065933 -0.000032662 0.000010333 0.000006365 0.000047334 0.000142851 0.000109657 -0.000047197 0.000040896 0.001369995 0.002704480 0.001184051 -0.000351867 -0.000338987 0.000870074 0.001566410 0.000852136 -0.000243404 -0.000196287 -0.000279545 -0.000418651 -0.000253230 0.000083181 -0.000007801 -0.001217811 -0.002337868 -0.000875354 0.000314073 0.000342401 -0.001549595 -0.002637897 -0.001555467 0.000412424 0.000382104 -0.025664243 0.009571512 0.004682815 0.002353589 0.001996531 0.025873620 0.007743558 0.003915445 0.002480528 -0.003662808 0.005782987 0.001593445 0.006372301 0.000205842 -0.002667367 0.000385761 0.000850819 0.000530568 -0.000213305 -0.000013358 -0.000128648 -0.000263178 -0.000145918 0.000053126 0.000020541 -0.000078264 -0.000179735 -0.000131241 0.000056221 -0.000008795 -0.000327786 -0.000690936 -0.000389507 0.000151361 0.000033279 -0.000180238 -0.000241849 -0.000089975 0.000048372 0.000033699 0.000476483 0.001078821 0.000660323 -0.000254073 -0.000025579 0.000181353 0.000438485 0.000237584 -0.000088600 -0.000019609 -0.000198369 -0.000622517 -0.000427947 0.000153672 -0.000014799 -0.000241570 -0.000572894 -0.000362042 0.000135046 0.000007827 -0.000475435 -0.001019122 -0.000465042 0.000169137 0.000086176 0.000100878 0.000525561 0.000410396 -0.000133383 0.000030619 0.000044827 0.000006590 0.000023366 -0.000036823 0.000011743 0.000108272 0.000209728 0.000089347 -0.000038751 -0.000018729 -0.000051448 -0.000197067 -0.000126133 0.000033440 0.000004440 0.000013894 0.000046325 0.000016731 -0.000002589 -0.000006768 0.000273669 0.000561373 0.000211693 -0.000063440 -0.000065201 -0.000015482 -0.000133958 -0.000097389 0.000029887 -0.000008674 0.000030449 0.000123151 0.000056049 0.000001344 -0.000018827 0.000115854 0.000227672 0.000094200 -0.000036848 -0.000021958 0.000024201 0.000005932 -0.000024816 0.000008586 -0.000012763 -0.000020715 -0.000009748 -0.000005307 0.000013155 -0.000003044 0.000216682 0.000427873 0.000221120 -0.000089880 -0.000027627 0.000331493 0.000605970 0.000308396 -0.000124670 -0.000048925 -0.000191952 -0.000380960 -0.000198512 0.000076681 0.000027054 -0.000114110 -0.000228768 -0.000117224 0.000050003 0.000013465 -0.000060408 -0.000104510 -0.000050228 0.000022561 0.000009232 0.000131633 0.000247530 0.000127882 -0.000052355 -0.000016676 -0.000037089 -0.000085286 -0.000040473 0.000011425 0.000008524 0.000042996 0.000138997 0.000075351 -0.000017141 -0.000009581 -0.000021409 -0.000023140 -0.000001844 0.000006463 0.000004385 0.000026114 0.000103050 0.000061207 -0.000009717 -0.000007261 0.000008259 0.000048610 0.000027901 -0.000002035 -0.000003829 -0.000002675 -0.000012273 -0.000004951 -0.000001146 0.000002865 -0.000004696 -0.000020848 -0.000016047 0.000006303 -0.000001720 0.000000947 -0.000017271 -0.000011669 -0.000001626 0.000001821 0.000011972 0.000024585 0.000007896 -0.000001335 -0.000004034 -0.000389777 -0.000927621 -0.000368562 0.000092508 0.000100188 0.000031558 0.000140789 0.000063960 -0.000015672 -0.000008057 0.000009356 -0.000002321 0.000003268 -0.000006883 0.000005286 -0.000030038 -0.000073553 -0.000033197 0.000010753 0.000008938 0.000009239 0.000016505 0.000009867 -0.000009992 0.000006182 0.000024682 0.000079589 0.000041500 -0.000010382 -0.000006763 0.000036580 0.000113425 0.000045479 -0.000011142 -0.000009032 -0.000006102 -0.000012962 -0.000007973 0.000004692 -0.000001943 -0.000041071 -0.000145598 -0.000076178 0.000011650 0.000014865 -0.000000192 0.000012012 0.000011618 -0.000003071 0.000001851 -0.000007204 -0.000011727 -0.000004618 0.000002069 0.000000483 -0.000002592 -0.000020221 -0.000015064 0.000003017 0.000000194 0.000014851 0.000022618 0.000004351 -0.000000490 -0.000005181 0.000015258 0.000028942 0.000011888 -0.000004509 -0.000002819 -0.000013285 -0.000026881 -0.000008153 0.000001875 0.000004443 -0.000016851 -0.000038943 -0.000018598 0.000006437 0.000002481 0.000003013 0.000003830 0.000002901 -0.000002625 0.000001261 0.000013454 0.000038960 0.000020573 -0.000007219 -0.000001368 0.000020088 0.000046826 0.000025750 -0.000010525 -0.000001154 -0.000008458 -0.000014362 -0.000005559 0.000003306 0.000000971 -0.000015000 -0.000024319 -0.000012209 0.000004311 0.000003082 -0.000000588 -0.000007134 -0.000003627 0.000002504 -0.000001294 0.000000389 0.000007187 0.000005520 -0.000002727 0.000001393 -0.000016041 -0.000031260 -0.000016707 0.000006289 0.000002149 0.000004045 0.000007217 0.000004135 -0.000000448 -0.000001442 0.000015876 0.000027684 0.000012629 -0.000005622 -0.000002429 -0.000005454 -0.000012748 -0.000007417 0.000002795 0.000000669 0.000341903 0.000564241 0.000284234 0.000591125 0.000374307 0.000083584 0.000097193 -0.000001228 -0.000259100 -0.000748246 -0.000041885 -0.000206501 -0.000145846 -0.000449312 -0.000181169 -0.000128731 -0.000208959 -0.000128181 -0.000114583 0.000035087 -0.000141921 -0.000286529 -0.000153123 -0.000169424 0.000058093 -0.000026408 -0.000055983 -0.000018472 0.000148599 0.000106386 0.000001215 -0.000007164 0.000003125 0.000013162 -0.000061060 0.000008629 0.000026020 -0.000009685 0.000022312 -0.000036416 -0.000031392 -0.000026094 -0.000028831 -0.000115248 -0.000022055 -0.000040094 -0.000019181 -0.000004776 -0.000088152 0.000066160 -0.000110045 -0.000095449 -0.000032463 -0.000177984 0.000114124 0.000046187 0.000067519 0.000036790 0.000040235 -0.000056033 -0.000050405 -0.000112756 -0.000054015 0.000052541 0.000000204 0.000029270 -0.000014090 -0.000025558 0.000117974 -0.000014924 0.000022568 0.000067778 0.000022400 0.000019952 -0.000014570 -0.000143117 -0.000211526 -0.000102600 -0.000078159 0.000038155 -0.000071055 -0.000116051 -0.000027399 -0.000075670 0.000128221 0.000016242 -0.000107092 0.000009983 0.000077466 -0.000080744 0.000074148 0.000128567 0.000053583 0.000013650 -0.000028216 0.000003664 0.000003302 -0.000006317 0.000047202 -0.000034177 0.000023798 0.000066600 0.000015183 -0.000009993 -0.000041572 0.000025158 0.000035235 0.000016812 -0.000007509 -0.000014789 -0.000024509 -0.000037301 -0.000021116 -0.000017797 0.000002325 0.000015107 0.000022962 0.000011712 0.000012548 -0.000001382 0.000138443 0.000125581 0.000044781 0.000166305 -0.000138790 0.000086311 -0.000024054 -0.000033285 0.000298665 -0.000186666 0.000081802 0.000191832 0.000110879 -0.000121877 0.000043645 0.000027024 0.000039987 0.000019093 -0.000006192 -0.000006984 -0.000016560 -0.000030992 -0.000011887 -0.000010383 0.000009900 0.000020994 0.000036856 0.000017969 -0.000000737 -0.000004323 0.000098604 0.000172786 0.000072258 -0.000002648 -0.000003923 0.000014980 0.000021351 -0.000002326 0.000035456 -0.000014965 0.000068940 0.000181155 0.000076896 -0.000069533 0.000056500 -0.002708659 -0.006105620 -0.002489392 -0.000702199 0.000836479 -0.001750659 -0.000532494 -0.000083187 0.000193647 0.000395642 -0.002165804 0.001446531 0.000371486 0.000416744 0.000535876 0.000466651 0.001421344 0.001108002 -0.000067701 -0.000032884 -0.000765517 0.000552626 0.000461691 0.000049912 0.000266930 0.001478589 0.001146193 0.000600706 -0.000112008 -0.000490594 -0.000158772 -0.001624220 -0.001567135 -0.000011353 0.000075743 -0.000217024 -0.000559330 -0.000185982 0.000029143 0.000016686 -0.000673335 -0.001017360 -0.000162410 0.000110171 0.000042091 -0.000833934 -0.000491074 0.000987885 0.000178228 0.000052990 -0.001293474 -0.001095403 -0.000622828 0.000088487 0.000091986 0.000564261 -0.000675768 -0.000399093 -0.000180413 0.000041595 0.000619039 -0.001776691 -0.002044309 -0.000154749 -0.000268779 0.001577238 -0.001888459 -0.000540810 -0.000926938 -0.000284977 0.002449317 0.001038604 0.000123700 -0.000326163 -0.000453972 0.000112383 0.000333123 0.000180944 0.000047971 0.000002066 0.000912793 -0.000017033 -0.000044776 -0.000237759 -0.000277293 0.000023801 -0.000474579 0.000080850 -0.000176239 -0.000032874 -0.000266889 -0.000256836 -0.000118006 -0.000001101 0.000094092 0.000006331 0.000122110 0.000052564 0.000011499 -0.000004711 -0.000059918 -0.000036030 -0.000042343 -0.000007542 0.000024487 0.000212921 0.001832128 0.001464882 0.000010439 -0.000103580 0.000398731 0.000494010 0.000296876 -0.000121393 -0.000098136 -0.000142300 -0.000126281 0.000009865 0.000051417 0.000021487 -0.000091314 -0.000325693 -0.000093669 0.000018230 0.000036885 0.000053626 0.000110311 0.000084007 0.000009187 0.000007401 -0.000040861 -0.000065580 -0.000060088 0.000003650 0.000005787 -0.000458915 -0.000118772 -0.000635579 -0.000171545 -0.000092721 0.000880395 0.001105767 0.000380574 -0.000152496 -0.000126757 -0.001519736 -0.001412145 -0.001158529 -0.000016790 0.000220938 -0.000063126 -0.000067216 -0.000023567 -0.000060340 0.000058539 0.000004291 0.000070598 0.000040648 -0.000103984 0.000058074 -0.000028889 -0.000097109 -0.000062626 0.000107730 -0.000051964 -0.000101578 -0.000110355 -0.000047331 -0.000078731 0.000080866 -0.000036097 0.000021404 0.000014652 -0.000135052 0.000081475 -0.000076032 -0.000114215 -0.000059741 -0.000010174 0.000025830 -0.000113032 -0.000646693 -0.000418800 0.000006175 0.000047412 -0.000136237 -0.000334327 -0.000215695 0.000042549 0.000034812 -0.000064488 -0.000391990 -0.000364554 -0.000025374 0.000024097 -0.000018174 -0.000585703 -0.000403797 0.000006549 0.000042103 -0.000121001 -0.000253693 -0.000107321 0.000045994 0.000030898 -0.000038292 0.000359507 0.000276540 -0.000006500 -0.000007742 -0.000029588 0.000534282 0.000144874 -0.001271095 -0.000665427 0.000463665 0.000760543 0.000011609 -0.002195543 0.002831624 0.000259796 -0.001128899 -0.000422048 0.004894776 0.001297209 0.002974652 0.001890009 0.001199832 -0.016612344 0.012248555 -0.000144647 -0.006037188 -0.001347283 0.023790804 0.003969630 -0.001366745 0.000137587 -0.000367519 0.004179255 -0.003690281 0.000223250 0.000133415 0.000102963 0.000095111 -0.000807830 -0.000145542 -0.000672929 -0.000243623 0.001476681 -0.000085738 -0.000115904 0.000020988 -0.000058473 -0.000211214 0.000351124 -0.000031738 -0.000236098 -0.000018548 -0.000038440 -0.000162201 -0.000069893 0.000103736 -0.000025833 -0.000528540 0.001072658 0.000048312 0.000172030 0.000016642 -0.000114703 -0.000154987 0.000048961 0.000133540 0.000053612 -0.000169813 -0.000126197 -0.000025255 -0.000040704 -0.000021320 0.000051657 0.000034788 0.000018871 -0.000080951 -0.000029600 0.000283924 0.000106209 0.000051501 0.000048978 0.000025129 0.000016636 -0.000011667 -0.000053202 -0.000009913 -0.000021559 -0.000005271 -0.000015470 -0.000008435 -0.000010774 -0.000001054 0.000007311 0.000042475 0.000257369 -0.000610959 -0.000053048 0.000028769 -0.003319618 0.000234734 0.000132552 0.000336152 0.000807946 -0.000880414 -0.000205457 0.000498364 -0.000036105 -0.002149093 0.000894999 0.000069480 0.000127154 -0.000051337 -0.000480879 0.001013838 -0.000344321 0.000079966 -0.000180482 0.000925548 -0.001157635 0.000144714 -0.000165725 0.000033485 -0.000020162 -0.000454586 -0.000219446 -0.000103576 -0.000076747 -0.000530618 -0.000319028 -0.000500060 0.000006321 -0.000192217 0.000049149 -0.000050037 0.000266741 0.000179844 0.000275541 0.000604302 0.000389002 -0.000010721 0.000009701 0.000027228 0.000157729 -0.000056745 0.000007734 0.000002957 0.000008725 0.000045450 -0.000029716 -0.000009132 -0.000006158 0.000001133 0.000057897 0.000079227 -0.035965340 -0.019030544 -0.015876721 -0.125290767 -0.049989622 -0.061700689 0.024439888 -0.007304050 -0.030736379 -0.224745251 -0.034207594 0.004494759 -0.003665956 -0.025139101 -0.076041349 -0.053545638 0.028866629 0.000369138 0.053079914 0.019265674 0.003328989 -0.000310729 0.002875896 0.006107013 -0.030116172 -0.008419393 0.007364933 -0.004830296 0.012277747 -0.010661616 0.025424691 -0.011377976 -0.000399090 -0.031672745 -0.024540615 0.012346147 -0.008510191 -0.002585955 -0.040969068 -0.004708361 0.011127884 -0.008346623 0.004522947 -0.025568449 -0.010206339 0.002532488 -0.001944527 -0.000101767 -0.006301073 0.001818829 -0.024000810 0.012580319 -0.000718402 0.022020001 0.016461088 -0.008106665 0.003554428 -0.000159277 0.004384104 0.004687289 -0.000042172 0.000239600 0.000216419 0.000452683 0.000812704 0.000185848 -0.000106877 0.000091034 -0.000433907 -0.000651612 0.000562477 0.000101047 -0.000071386 0.000318131 0.000591179 0.000059035 -0.000079595 0.000171654 -0.000449393 0.000330290 -0.000328181 -0.000124553 0.000096310 -0.000833011 0.000719438 0.000191935 0.000097088 -0.000590649 -0.000556780 0.000261441 0.016597122 -0.009437829 0.000122965 -0.015200723 -0.004539940 0.013529623 -0.008958153 -0.000202391 -0.004961391 -0.007104499 0.009112586 -0.005550000 -0.000701094 -0.007076016 -0.005230260 -0.020418966 0.011805011 -0.000167944 0.014870622 0.011187971 0.012002192 -0.005406808 0.000262876 -0.009794407 -0.007014469 -0.002094921 0.001558008 0.000503431 0.001345323 0.001191630 0.000299393 -0.000305546 -0.000001406 0.000374415 -0.000571070 0.000173682 0.000230995 0.000178976 0.001091897 -0.000555329 0.000001042 0.000139351 -0.000089076 0.000524401 -0.000310004 -0.000296140 0.000327899 0.000031179 0.000298910 0.000061555 0.000145859 -0.000008161 0.000000075 -0.000203041 -0.000080011 0.000060209 0.000059193 0.000116310 0.000162127 0.000203493 -0.000030407 -0.000067881 -0.000042970 0.000016736 0.000000381 0.000036684 0.000073699 0.000027070 -0.000006048 -0.000011753 -0.000051915 -0.000095258 -0.000043556 0.000014193 0.000014833 0.000000806 -0.000000292 -0.000002320 0.000002640 -0.000002575 0.000022791 0.000040656 0.000015438 -0.000005452 -0.000006628 0.000004450 0.000011060 0.000003848 -0.000000830 -0.000001738 0.000007752 0.000019447 0.000010500 -0.000006806 0.000001119 -0.000014060 -0.000024816 -0.000010922 0.000004651 0.000002662 0.000008073 0.000017893 0.000009259 -0.000004269 -0.000001046 -0.000006870 -0.000014060 -0.000009115 0.000005129 -0.000000708 -0.000007867 -0.000010448 -0.000000399 -0.000002470 0.000005385 -0.000006211 -0.000012885 -0.000006431 0.000003340 0.000000414 -0.000009917 -0.000023527 -0.000011637 0.000005660 0.000004247 0.000025916 0.000055784 0.000018044 -0.000010124 -0.000007497 -0.000020199 -0.000072889 -0.000013790 0.000001974 0.000015845 0.000039262 0.000084949 0.000051544 -0.000015858 -0.000005661 0.000029441 0.000067266 0.000030092 -0.000004910 -0.000009246 0.000032213 0.000093455 0.000046493 -0.000012518 -0.000006241 -0.000138757 -0.000337578 -0.000159655 0.000042369 0.000042077 -0.000006199 -0.000027864 0.000001694 -0.000001261 0.000005462 0.000053339 0.000104314 0.000044266 -0.000013607 -0.000019922 -0.000037217 -0.000072695 -0.000047931 0.000015885 0.000003882 -0.000097464 -0.000219949 -0.000095476 0.000029351 0.000030898 -0.000099699 -0.000187970 -0.000103537 0.000029443 0.000024757 0.240690768 -0.017696670 0.672369140 -0.010726790 -0.029598158 0.710300853 -0.010659624 0.089658447 0.195183409 0.227556267 -0.001181584 -0.174328033 -0.119117440 -0.057487562 0.666589986 0.020755808 -0.063022014 -0.315481314 -0.098286349 0.031760913 0.016584867 -0.036515016 -0.111338298 -0.110139217 0.070067419 -0.000336103 -0.150033073 0.130088632 0.025506509 0.010325259 0.000095453 0.128522501 -0.236483177 -0.046867532 0.017045965 -0.000547358 0.027188096 -0.045136043 -0.049362354 0.005900942 -0.022932780 -0.003332971 0.001373969 -0.001881479 0.011910820 -0.013526679 0.009206556 -0.000628797 -0.000375481 -0.017510915 0.001062347 -0.000107977 -0.001420327 0.004528955 -0.001705544 -0.000147812 0.000057205 -0.000777040 -0.000532669 0.000727025 0.001106659 -0.000346646 -0.000518184 -0.000305889 -0.000856629 -0.003647381 -0.000879654 -0.000215020 -0.000208294 -0.000326427 -0.001392403 -0.001159031 0.001947426 0.001175703 0.002735412 0.004951441 -0.002095550 -0.000286455 -0.001199126 0.000704550 -0.003754663 0.002363267 -0.000625593 -0.000289373 -0.003516671 -0.000671821 0.000351691 -0.000476697 -0.000337977 -0.001157538 -0.000640484 0.000227035 0.000500544 0.000483623 0.000718823 0.001195653 -0.000201869 0.000303471 0.000221810 0.000360343 0.000005832 0.000290473 -0.000483339 -0.000303056 -0.000837568 -0.001128766 0.000889364 -0.000241946 -0.000170467 -0.001775508 -0.000061843 -0.000056744 0.000066886 0.000069901 0.000379084 0.000072099 -0.000088464 0.000057442 0.000044615 0.000161100 0.000255944 -0.000209110 0.000056735 0.000025779 0.000352240 -0.000012363 -0.000018311 0.000016314 0.000009586 0.000021592 0.000000921 -0.000001484 0.000002885 0.000001952 0.000002837 -0.000001991 0.000001540 0.000000329 0.000001590 -0.000001368 -0.000001507 0.000001501 0.000001278 0.000002341 -0.000000414 0.000000716 0.000001434 -0.000003939 -0.000003254 -0.000002344 0.000008338 -0.000007939 0.000005390 0.000008582 0.000012787 -0.000003221 -0.000000376 0.000000269 0.000000607 -0.000001625 -0.000016085 0.000009666 0.000005437 0.000011663 -0.000013354 -0.000018170 0.000020145 -0.000012335 -0.000008788 -0.000031928 0.000034305 -0.000015076 -0.000019959 -0.000035314 0.000011299 0.000002812 0.000001534 -0.000009359 -0.000006872 -0.000005045 -0.000032985 0.000021012 -0.000002425 0.000002380 -0.000027663 -0.000019781 0.000013609 -0.000001363 -0.000002582 -0.000019354 0.000001805 0.000001169 -0.000006183 -0.000006090 -0.000004330 -0.000015500 0.000008442 0.000002720 0.000002190 -0.000011001 -0.000000147 -0.000001827 0.000004492 0.000009890 0.000006333 0.000001283 0.000005306 -0.000011033 -0.000009161 -0.000009325 0.000001588 -0.000000233 -0.000002312 -0.000006566 -0.000002950 -0.000001690 0.000001938 0.000000944 0.000000168 -0.000002486 -0.000004191 0.000001293 0.000006863 0.000005659 0.000003153 0.000183134 -0.000111662 0.000000399 -0.000027451 0.000147089 0.000004355 -0.000004156 0.000003378 0.000005251 0.000010178 -0.000000112 -0.000001867 0.000006346 0.000004904 0.000005206 0.000002542 -0.000001939 -0.000001345 -0.000001368 0.000001544 0.000003897 -0.000002905 0.000002575 0.000001920 0.000005073 0.000000340 -0.000001329 0.000002848 0.000002265 0.000002761 -0.000002636 0.000001437 0.000001249 0.000002093 -0.000000942 -0.000000760 -0.000000286 0.000001816 0.000001645 0.000001103 -0.000004169 -0.000003037 0.000009179 0.000007038 0.000005703 -0.000001548 -0.000000072 0.000000895 -0.000001349 -0.000001059 -0.000001105 -0.000001805 0.000003812 0.000002607 0.000003198 -0.000086435 0.000137880 -0.000132617 -0.000117764 -0.000252333 -0.000139834 0.000134774 -0.000059345 -0.000039224 -0.000235954 0.000022650 -0.000029882 0.000041531 0.000052687 0.000061720 0.000103558 -0.000188260 0.000207047 0.000184574 0.000340039 -0.000009790 0.000018011 -0.000020798 -0.000020265 -0.000036623 -0.000033009 0.000033779 -0.000017607 -0.000018132 -0.000062108 -0.000015138 0.000017366 -0.000012547 -0.000011377 -0.000031655 -0.000002796 -0.000001055 0.000004929 0.000005438 0.000002554 -0.000001656 0.000005224 -0.000007446 -0.000007498 -0.000008809 -0.000007481 0.000013456 -0.000014906 -0.000013937 -0.000021198 0.000000712 -0.000012837 0.000017205 0.000014816 0.000023600 0.000023498 -0.000017618 0.000003232 -0.000001498 0.000008891 0.000002421 0.000002371 -0.000005892 -0.000006469 -0.000006905 0.000003449 -0.000002366 0.000000603 0.000000582 -0.000002783 -0.000005027 0.000003081 0.000000199 0.000005911 0.000000571 -0.000001146 0.000001234 -0.000002519 -0.000000442 -0.000001435 -0.000008492 0.000003131 0.000003480 0.000005095 0.000000936 0.000000951 0.000005411 -0.000007620 -0.000008079 -0.000010467 0.000012744 0.000015094 -0.000008346 -0.000006056 -0.000025577 -0.000008900 -0.000004360 0.000014415 0.000014466 0.000026003 -0.000022052 0.000011659 0.000010261 0.000014625 0.000008889 -0.000006117 0.000007993 -0.000010457 -0.000011291 -0.000013204 -0.000013735 0.000010649 -0.000007241 -0.000007733 -0.000006171 0.000014946 -0.000005651 -0.000012003 -0.000015338 -0.000002146 -0.000002987 0.000001472 0.000001456 0.000001808 0.000000908 -0.000009185 0.000003948 0.000005315 0.000005505 0.000002708 0.000001945 -0.000002363 0.000000090 0.000001991 0.000003331 -0.000004015 -0.000001328 0.000005918 0.000004923 0.000003118 -0.000004013 0.000001934 0.000000908 0.000001520 -0.000001071 0.000000467 -0.000001056 0.000000743 0.000001036 0.000000106 -0.000006332 -0.000034564 0.000011879 0.000011651 0.000044750 0.000093981 -0.000033509 -0.000029683 -0.000037588 -0.000017423 -0.000013474 0.000008822 -0.000005174 -0.000002507 -0.000021623 0.000003064 -0.000008520 0.000007428 0.000008465 0.000016581 0.000008076 -0.000003640 -0.000006533 -0.000008478 0.000000195 -0.000026024 0.000012316 0.000007984 0.000012179 0.000000073 -0.000002071 -0.000001557 0.000003677 0.000003814 0.000002365 -0.000003561 0.000001459 0.000000390 0.000001914 -0.000001641 0.000002070 0.000000031 -0.000001107 -0.000001424 0.000000198 -0.000001994 -0.000000491 0.000003290 0.000003894 0.000003801 -0.000002087 0.000002746 -0.000001664 -0.000002671 -0.000001284 0.000006770 -0.000003729 0.000000202 -0.000000826 0.000002784 -0.000010736 0.000036497 -0.000050216 -0.000040711 -0.000075550 -0.000210733 0.000135456 0.000001481 0.000035768 -0.000169736 -0.000148955 0.000103876 -0.000033111 0.000006929 -0.000145018 0.000022856 -0.000060372 0.000058786 0.000035085 0.000106452 0.000167451 -0.000125194 0.000018482 -0.000018874 0.000174524 0.000274578 -0.000196503 0.000068222 0.000004268 0.000291151 0.000473490 -0.018514332 -0.010557766 -0.011146608 -0.240707986 -0.001755511 -0.029866883 0.002595152 -0.005075715 -0.013227862 0.003565729 -0.014207962 -0.001786225 0.001344552 -0.011682718 -0.000081942 0.000129856 -0.000136051 -0.000125969 -0.000227817 0.000024125 -0.000026688 0.000022196 0.000020453 0.000044148 0.000018159 -0.000038412 0.000043713 0.000043706 0.000072049 0.000063487 -0.000075869 0.000066758 0.000061254 0.000120906 0.000007293 0.000027333 -0.000063279 -0.000090689 -0.000076553 -0.000107739 0.000161497 -0.000170821 -0.000176008 -0.000282411 -0.000043167 0.000055303 -0.000057514 -0.000058741 -0.000089431 0.000076700 -0.000152598 0.000193326 0.000220674 0.000294641 0.000060703 -0.000095195 0.000103587 0.000117181 0.000175368 0.000086338 -0.000053355 0.000023196 -0.000001484 0.000019657 -0.000077322 0.000189663 -0.000258241 -0.000302879 -0.000374840 0.000006893 -0.000024483 0.000040097 0.000029589 0.000013691 -0.000015350 0.000002899 0.000008203 0.000018000 0.000007540 0.000026120 -0.000052572 0.000068775 0.000079581 0.000090602 -0.000004636 0.000006435 -0.000010850 -0.000007100 -0.000004762 -0.000049422 0.000026162 0.000002951 0.000023281 -0.000004431 0.000023984 -0.000047374 0.000068680 0.000081270 0.000128925 -0.000017022 0.000033076 -0.000033556 -0.000028481 -0.000047211 -0.000017017 0.000003828 0.000008837 0.000017959 0.000014368 0.000004622 -0.000023451 0.000037660 0.000045082 0.000055063 -0.000003343 0.000010402 -0.000018139 -0.000018295 -0.000015390 -0.000034383 0.000029262 -0.000013331 -0.000004058 -0.000034294 -0.000046700 0.000029542 0.000000383 0.000019272 -0.000023524 0.000032203 -0.000028033 0.000014418 0.000011003 0.000035498 0.000018304 -0.000015690 0.000008633 0.000003135 0.000019984 0.000007172 -0.000002149 -0.000004317 -0.000009134 -0.000001373 -0.000019432 0.000014408 -0.000002763 0.000002244 -0.000014017 0.000007644 -0.000005616 0.000006228 0.000006338 -0.000000233 -0.000016455 0.000028532 -0.000033460 -0.000038596 -0.000040162 -0.000000802 0.000010246 -0.000014734 -0.000018647 -0.000018493 -0.000013983 0.000026728 -0.000036168 -0.000042494 -0.000035518 -0.000006758 0.000013578 -0.000019233 -0.000023144 -0.000017450 0.000001670 -0.000002931 0.000004065 0.000004337 0.000001270 0.000002933 -0.000007632 0.000009249 0.000010755 0.000017087 0.000003650 -0.000009075 0.000012748 0.000015517 0.000011709 -0.000001969 0.000000814 0.000001987 0.000003396 0.000002714 0.000083218 -0.000061328 0.000015166 0.000006138 0.000055093 -0.000019485 0.000036551 -0.000047333 -0.000043891 -0.000104155 0.000000006 -0.000012811 0.000010723 0.000008794 0.000042700 0.000006763 -0.000005572 -0.000000780 -0.000003203 0.000013619 -0.000001084 -0.000004568 0.000002459 -0.000002131 0.000011874 -0.000008211 0.000014180 -0.000010867 -0.000009235 -0.000024322 -0.000013083 0.000015830 -0.000008307 -0.000013379 -0.000042328 0.000000550 -0.000000707 -0.000000396 -0.000001115 -0.000004118 0.000019750 -0.000039091 0.000044420 0.000043224 0.000065322 -0.000002384 0.000006055 -0.000008587 -0.000011507 -0.000012378 0.000000763 0.000000809 -0.000002709 -0.000004006 -0.000003400 0.000003361 -0.000007716 0.000011287 0.000012552 0.000014207 -0.000001493 -0.000003428 0.000006679 0.000009345 0.000010833 -0.000002423 0.000000219 0.000001558 0.000003599 0.000002134 0.000002328 0.000000609 -0.000001843 -0.000002637 -0.000004275 0.000003655 -0.000003579 0.000002519 0.000001062 0.000003182 -0.000000403 -0.000000474 0.000001104 0.000000302 -0.000000097 -0.000003837 0.000006182 -0.000007059 -0.000006855 -0.000008958 -0.000003987 0.000005484 -0.000005004 -0.000004775 -0.000008188 0.000000573 0.000000671 -0.000002098 -0.000003548 -0.000002739 0.000001948 -0.000000596 -0.000001014 -0.000001948 -0.000000250 0.000000617 -0.000001568 0.000002058 0.000001799 0.000002840 -0.000000804 0.000002702 -0.000003889 -0.000004554 -0.000005408 0.000002302 -0.000002528 0.000001254 0.000000997 0.000003046 -0.000000859 0.000000677 -0.000000415 -0.000000870 -0.000001130 -0.000001675 0.000000211 0.000001879 0.000003306 0.000001666 0.000001350 -0.000001695 0.000001997 0.000002154 0.000003272 -0.000350088 -0.000029342 0.000104121 0.000046242 0.000016111 0.000471497 -0.000033178 0.000077873 0.000057871 0.000040922 0.000248119 -0.000015449 -0.000120175 -0.000060947 -0.000057497 0.000053568 0.000003122 -0.000039195 -0.000020402 -0.000011131 0.000174530 0.000013852 -0.000077357 -0.000039607 -0.000021739 -0.000095957 -0.000004031 0.000020165 0.000008497 0.000015649 0.000087361 0.000000774 0.000008147 0.000007091 0.000008052 0.000004028 -0.000013495 0.000011528 0.000006450 0.000005148 0.000033481 0.000009279 -0.000025561 -0.000013919 -0.000015571 -0.000000318 0.000017848 -0.000042542 -0.000023534 -0.000026848 0.000021691 0.000031151 -0.000076301 -0.000044495 -0.000039804 -0.000001933 -0.000008637 0.000024168 0.000013270 0.000012007 0.000029283 -0.000006981 0.000012875 0.000004744 0.000014993 -0.000001687 -0.000016625 0.000033050 0.000019392 0.000018086 -0.000006397 -0.000002796 0.000009412 0.000003282 -0.000002522 -0.000018669 0.000001164 -0.000033750 -0.000024637 -0.000005123 0.000049464 0.000029436 -0.000042436 -0.000025021 -0.000010165 0.000066668 -0.000008817 0.000026343 0.000018982 0.000024757 -0.000030350 -0.000003579 0.000012283 0.000007641 -0.000002054 0.000023177 -0.000005993 0.000017391 0.000008900 0.000008268 -0.000031984 -0.000005637 0.000015828 0.000007811 0.000003965 0.000001969 -0.000000348 0.000002943 0.000004312 0.000001215 0.000014922 0.000000973 -0.000006499 -0.000004403 -0.000001309 -0.000006230 -0.000000737 0.000005089 0.000002880 0.000001741 -0.000046922 -0.000035159 0.000094572 0.000061379 0.000061683 -0.000031108 -0.000059502 0.000129915 0.000071201 0.000085447 -0.000011399 0.000033014 -0.000037016 -0.000014540 -0.000030573 0.000000620 0.000001718 0.000002035 0.000005055 0.000002006 0.000006345 0.000002212 -0.000006105 -0.000004865 0.000000276 -0.000003426 0.000001027 0.000002462 0.000003170 0.000001231 -0.000007230 0.000005526 0.000010693 0.000013632 -0.000002842 0.000001987 -0.000006648 0.000003860 0.000001493 0.000005961 -0.000040865 0.000016638 -0.000017993 -0.000007512 -0.000017239 -0.000416120 -0.000626989 0.002633465 0.003669215 -0.030903033 -0.000025648 -0.001871325 -0.001483592 -0.001289581 0.002569914 -0.000197685 -0.001653077 -0.000941853 -0.001582931 0.004971588 -0.000409577 0.000006289 0.000115370 -0.001098260 0.001912691 0.000302793 0.000772235 -0.000265679 -0.000542063 0.001564411 -0.000128182 -0.000600685 -0.000172333 0.000015141 0.001969722 0.000231559 -0.000259257 0.001197686 0.001624363 -0.001079847 0.000089083 -0.000081720 0.000073071 0.000392026 -0.000261793 0.000254068 -0.000264988 -0.000406777 0.000175328 0.000137981 0.000199881 -0.000780162 -0.001032398 -0.001086451 0.003350964 0.000299524 0.000807984 0.000063145 0.000192566 -0.000557567 -0.000157627 -0.001427557 0.000504990 0.000039191 -0.000516549 0.000262229 -0.003090790 0.003607732 0.001423292 -0.015482334 -0.000033365 0.000916471 0.001263033 0.000609399 -0.009285609 -0.000209078 0.002313269 0.001709099 0.001308433 -0.007464561 0.000042746 -0.000265387 -0.000151248 0.000301852 0.000862722 -0.000245868 -0.000942907 0.000540742 0.000808772 -0.001350705 -0.000046556 0.000244002 -0.000401350 0.000225050 -0.001392719 -0.000017434 -0.000020888 0.000089607 -0.000043664 -0.000200679 -0.000020598 0.000004699 -0.000009881 0.000050563 -0.000095295 -0.000004350 0.000011146 0.000007035 -0.000041102 -0.000118172 -0.000259544 0.000587924 -0.001108213 -0.001437531 0.000077047 -0.000155409 -0.000148664 -0.000181597 -0.000201120 -0.000170323 0.000045861 0.000015504 -0.000028910 -0.000039485 0.000137678 0.000035088 -0.000268668 0.000098902 -0.000017514 0.000069324 0.000009883 -0.000062688 0.000039544 0.000033398 0.000241789 -0.000000449 0.000038086 0.000017225 -0.000026137 0.000027968 0.000125796 -0.000015432 -0.000132032 0.000020660 0.000822741 -0.000277040 -0.000706907 -0.000243219 -0.000209344 0.001153620 0.000111632 -0.000097755 -0.000181009 0.000110216 0.000650111 0.000019167 0.000013771 -0.000038247 -0.000027493 -0.000025270 0.000011182 0.000023405 -0.000040720 -0.000019062 -0.000028095 -0.000003045 -0.000027904 0.000038909 0.000019549 0.000027488 0.000024858 0.000016109 -0.000052098 -0.000036299 -0.000033421 0.000017362 0.000024528 -0.000058874 -0.000031214 -0.000040500 0.000010041 -0.000003158 -0.000014560 -0.000012082 -0.000006874 0.000095898 -0.000235150 0.000308450 0.000392481 0.000190148 0.000055465 -0.000016805 0.000110124 0.000136656 0.000024752 0.000038625 0.000005820 0.000209253 0.000327816 -0.000314126 0.000084120 -0.000253407 0.000405768 0.000446033 0.000192295 0.000037021 -0.000025462 0.000026685 0.000027602 0.000143444 -0.000055565 0.000096922 -0.000285783 -0.000328515 0.000140616 0.004142556 0.000063443 0.000113490 0.000113994 0.000116490 0.002093946 0.000408278 0.000154524 0.000194720 0.000179211 0.001329221 -0.000090725 -0.000023477 -0.000014612 0.000257025 0.008929484 0.000608942 -0.000214508 0.000146551 -0.000263091 -0.014288663 -0.000064138 -0.000378947 -0.000382888 0.000459106 0.001133730 0.000111381 0.000191499 0.000063260 -0.000217602 0.000253461 -0.000113030 -0.000047383 -0.000031085 -0.000042391 -0.000833351 -0.000082567 -0.000024687 -0.000049752 0.000016644 0.000159794 0.000040228 0.000022180 0.000021298 0.000024925 -0.000031548 -0.000059014 0.000008781 -0.000030300 0.000010021 -0.000087127 0.000126275 0.000034642 0.000035854 0.000033187 -0.000238896 -0.000024963 -0.000019101 -0.000012402 -0.000038092 0.000293064 -0.000007503 0.000021257 0.000013778 0.000004050 0.000030867 0.000000468 -0.000009391 -0.000006201 -0.000001756 0.000029400 -0.000006515 -0.000005485 -0.000003178 0.000013767 0.000000713 -0.000009147 0.000010688 0.000003672 0.000003890 -0.000009327 0.000006977 0.000002944 0.000003677 -0.000002689 -0.000034139 0.000005452 -0.000012564 -0.000004148 -0.000006057 -0.000412457 -0.000447534 -0.000088642 -0.000234712 -0.000118674 -0.000888167 -0.000106486 -0.000093130 -0.000065442 -0.000012679 -0.001647069 0.000103947 0.000075765 0.000004107 0.000064524 0.000090945 0.000091506 0.000030074 0.000027826 0.000052268 -0.000401121 -0.000039291 0.000067568 0.000023168 -0.000037018 0.000261172 -0.000089319 -0.000021453 -0.000020913 0.000026676 0.000689457 0.000029280 -0.000070884 0.000016654 -0.000132738 -0.000248143 0.000135715 -0.000016060 0.000058942 -0.000039048 -0.000633565 -0.000056299 -0.000022582 -0.000007058 -0.000038260 0.000073703 0.000005269 0.000024670 0.000006640 0.000000341 0.000072448 0.000005377 0.000007772 0.000007034 0.000002159 0.000176010 0.000044574 -0.000024482 0.000010104 -0.000009560 -0.032064960 -0.013713155 0.031157890 0.005320567 0.005440634 -0.066732071 0.046924705 0.026065056 0.017889373 0.005974236 -0.101838709 0.013938838 0.015368898 0.016183118 0.005137215 0.019195428 -0.298941533 0.027418530 -0.035267627 -0.010749300 -0.011138564 0.000705433 -0.105795169 -0.014264244 -0.030264795 0.006486874 -0.051824595 -0.008425039 -0.082986292 -0.014576748 -0.019325973 -0.014128457 -0.004303820 -0.006077720 -0.004486901 -0.015792263 -0.005088582 -0.008367184 -0.005600196 -0.002711065 -0.007047711 -0.006682784 -0.005842584 0.001440575 -0.002074220 -0.003345243 -0.003546986 -0.002092149 -0.001231085 -0.000785676 0.010782389 0.020235468 0.008913185 0.007676751 0.004012466 0.008105709 0.006188103 0.002811937 0.001665404 0.001176031 0.000984372 -0.000241267 0.001350293 0.000487361 0.000041078 0.000472252 -0.000293705 0.000057316 -0.000058935 -0.000056023 -0.002262324 -0.000398956 0.000436555 0.000210113 -0.000005904 -0.000051826 0.000014978 -0.000062797 0.000239335 0.000048110 -0.000051460 0.000309909 0.000227914 0.000404622 0.000099708 0.000085732 0.000069617 0.000267286 -0.000633723 -0.000028425 -0.007153778 -0.039096401 -0.043005206 -0.025661050 -0.006688388 -0.005896466 -0.025519629 -0.007096470 -0.010032219 0.001398294 0.001119885 -0.019383300 -0.014403824 -0.004896739 -0.002303697 0.008685698 0.024943255 0.009906245 0.007394449 0.002641543 -0.004580358 -0.011422567 -0.009143199 -0.008005348 -0.002012077 0.000381782 0.002327212 -0.002476994 0.005118405 0.000232642 -0.000173718 0.000760093 -0.002014603 0.000292419 0.000052580 0.000032174 0.001704980 0.000562203 0.001596440 -0.000254907 0.000132767 0.001484853 0.001020307 -0.002397851 -0.000077161 0.000324281 0.000383950 -0.001104872 -0.000398376 -0.000408263 0.000160246 0.000022740 0.000000327 -0.000060961 -0.000097678 -0.000665698 0.000011097 -0.000533527 0.000014062 -0.000090578 0.000006710 -0.000011039 0.000011658 0.000011546 0.000019634 -0.000006265 -0.000000099 0.000005336 0.000004062 0.000006511 0.000007124 -0.000001851 -0.000003159 -0.000005560 -0.000001853 0.000000075 -0.000001420 0.000002283 0.000002013 0.000003047 -0.000002675 -0.000001021 0.000004047 0.000005004 0.000004615 -0.000001133 0.000000290 -0.000000069 -0.000000122 0.000000234 -0.000001191 0.000002720 -0.000003814 -0.000001535 -0.000005129 0.000001626 0.000000169 -0.000002007 -0.000002265 -0.000001990 -0.000001205 0.000001686 -0.000001515 -0.000000380 -0.000002456 0.000000989 -0.000002223 0.000002790 0.000001161 0.000004200 0.000000427 0.000002702 -0.000005548 -0.000004914 -0.000006790 0.000001080 -0.000001050 0.000001128 0.000000637 0.000001870 -0.000000380 -0.000005088 0.000005416 0.000003734 0.000013396 -0.000003582 -0.000000553 0.000000411 0.000002353 0.000004703 0.000004873 0.000003561 -0.000009483 -0.000007061 -0.000014428 -0.000008930 0.000014999 -0.000014646 -0.000009552 -0.000028927 -0.000007164 0.000007725 -0.000004116 -0.000003979 -0.000012063 -0.000009751 0.000015892 -0.000015366 -0.000016473 -0.000025306 0.000036458 -0.000026000 0.000010473 0.000011158 0.000035082 0.000001819 0.000007742 -0.000012036 -0.000011645 -0.000018190 -0.000010126 -0.000005598 0.000011355 0.000014054 0.000015970 0.000008465 -0.000011861 0.000011340 0.000007817 0.000023948 0.000019850 -0.000013175 0.000003590 0.000002436 0.000015426 0.000020088 -0.000013524 0.000006015 0.000000176 0.000019686 0.642930049 0.193638880 0.254132355 -0.010944610 -0.003078515 0.155862138 -0.014785448 -0.004619559 -0.138854088 0.247661604 -0.011494505 0.002329364 -0.025643972 0.053613053 0.040402089 0.009861326 0.004162525 0.000350697 0.000229784 0.000275451 -0.050946791 -0.022336508 -0.001055017 -0.002230249 -0.000850158 -0.012452692 0.001880637 -0.000071494 -0.000055804 -0.000265433 0.002069903 0.000498276 0.000060897 0.000018255 0.000119971 0.000845103 0.000090756 -0.000038323 -0.000132322 -0.000005197 0.001621052 0.001143692 0.000031338 0.000153838 -0.000053455 0.001862633 0.001549270 0.000154414 0.000622594 -0.000007456 0.005814557 0.001946100 0.000169061 0.000795188 0.000395548 -0.009402621 -0.002870460 -0.000276994 -0.000851658 -0.000256543 -0.000449988 -0.000113474 -0.000055997 -0.000260286 -0.000081627 0.000038516 -0.000282509 0.000014758 0.000001824 -0.000069623 0.001257006 0.000203304 0.000021649 0.000192049 0.000033423 -0.000500395 -0.000332661 -0.000042924 -0.000161894 -0.000035931 -0.002501600 -0.000981165 -0.000094091 -0.000351718 -0.000172115 0.000717677 -0.000007182 0.000024285 0.000018986 -0.000021170 0.000161001 0.000057677 0.000008815 0.000045796 0.000018504 0.000548386 0.000214203 0.000017954 0.000091604 0.000039573 0.000000038 0.000002149 0.000002273 0.000008877 0.000004219 -0.000001003 0.000000167 0.000000042 0.000001285 0.000000597 -0.000006892 -0.000002574 0.000000075 -0.000000580 -0.000000762 -0.000007460 -0.000003383 0.000000277 -0.000000305 -0.000000424 0.000004347 0.000001038 -0.000000133 -0.000001363 -0.000000406 0.000007908 0.000003260 0.000001328 0.000005258 -0.000001053 -0.000001902 0.000000158 -0.000000187 0.000000162 -0.000000329 -0.000047346 -0.000020078 0.000001038 -0.000002199 -0.000003851 -0.000038520 -0.000016541 -0.000001278 -0.000011868 -0.000002561 0.000100117 0.000042188 -0.000004111 -0.000000149 0.000007191 0.000012204 0.000004094 -0.000000335 -0.000002387 -0.000001151 -0.000062078 -0.000024591 -0.000000672 -0.000010217 -0.000003215 -0.000030559 -0.000013430 -0.000000432 -0.000006829 -0.000000095 0.000009580 0.000002663 -0.000000375 -0.000002064 -0.000000144 -0.000029401 -0.000010504 -0.000000432 -0.000003408 -0.000000546 -0.000008751 -0.000004509 0.000001742 0.000002265 -0.000002016 0.000008317 0.000000460 -0.000000678 -0.000004309 -0.000001136 0.000011317 0.000005313 -0.000001108 -0.000000417 0.000001577 -0.000007502 -0.000002392 -0.000000479 -0.000000265 -0.000000147 -0.000015387 -0.000005284 0.000000234 0.000000926 0.000000659 0.000357939 0.000146569 0.000000151 0.000051721 0.000017491 0.000008412 0.000002825 0.000000384 0.000003983 -0.000000296 -0.000006937 -0.000002442 0.000000372 0.000002016 0.000000910 0.000007225 0.000003038 -0.000000122 0.000000626 0.000000120 0.000003007 0.000001898 -0.000000069 0.000001942 0.000000255 -0.000001621 -0.000000041 0.000000135 0.000001216 0.000000453 -0.000007276 -0.000003314 0.000000264 -0.000000304 -0.000000266 -0.000003109 -0.000000811 0.000000040 0.000000559 0.000000110 -0.000010169 -0.000001789 0.000000338 0.000002875 0.000000993 -0.000001319 0.000001014 -0.000000618 -0.000000230 0.000000575 -0.000002532 0.000000157 0.000000116 0.000001437 0.000000675 -0.000125832 -0.000071172 -0.000020121 -0.000081895 -0.000025596 -0.000299854 -0.000128886 -0.000013334 -0.000062800 -0.000025161 -0.000002052 0.000003076 0.000007744 0.000023664 -0.000001067 0.000089611 0.000076425 0.000030690 0.000118648 0.000037612 -0.000009618 -0.000006464 -0.000003520 -0.000011212 -0.000004960 -0.000092563 -0.000034823 -0.000001975 -0.000017330 0.000002649 -0.000023537 -0.000011131 -0.000002753 -0.000009435 -0.000003536 -0.000009423 -0.000002971 0.000000655 0.000001535 0.000000046 0.000007408 0.000001138 -0.000001496 -0.000003767 -0.000001463 -0.000002489 -0.000006310 -0.000002202 -0.000008678 -0.000002826 0.000002726 0.000001795 0.000002070 0.000008459 0.000002462 0.000013510 0.000015921 0.000000573 0.000008713 0.000002361 0.000006380 0.000000837 -0.000000983 -0.000002717 -0.000001026 0.000002898 0.000003088 0.000000000 0.000001823 -0.000000815 0.000001238 -0.000006285 0.000001569 -0.000001332 -0.000001611 0.000006050 -0.000000569 -0.000000179 -0.000001166 -0.000001903 -0.000000800 -0.000003475 -0.000000801 -0.000000660 -0.000003191 0.000003254 0.000002222 -0.000001517 -0.000003303 -0.000001215 -0.000012566 -0.000004278 -0.000002020 -0.000005975 -0.000002623 0.000026721 -0.000003561 0.000001031 0.000004022 -0.000002822 -0.000009548 -0.000023076 -0.000000625 -0.000004124 -0.000003470 -0.000000791 -0.000004336 -0.000001261 -0.000006886 -0.000000658 -0.000020687 -0.000011726 0.000000458 -0.000007095 0.000004040 0.000022638 0.000011393 -0.000000730 -0.000000013 0.000003111 -0.000004285 -0.000003118 0.000000033 -0.000000798 -0.000000575 -0.000009441 -0.000005883 -0.000000591 -0.000000794 -0.000001239 0.000005573 0.000001220 0.000000693 0.000001094 -0.000000847 -0.000006624 -0.000001161 0.000000197 0.000001777 0.000000271 -0.000002480 -0.000001894 -0.000000182 -0.000000679 -0.000001105 -0.000001322 -0.000000024 0.000000358 0.000000667 0.000000020 0.000044523 0.000012911 0.000003467 0.000015445 0.000006368 0.000056089 0.000044719 0.000000712 0.000012742 0.000010626 -0.000027170 -0.000011899 -0.000000761 -0.000004394 0.000000460 -0.000002604 0.000002628 0.000001928 0.000006746 0.000002662 0.000011489 0.000006161 -0.000000021 -0.000000309 0.000001640 -0.000022248 -0.000015916 0.000000809 -0.000004818 -0.000001878 -0.000003334 -0.000000761 0.000000474 0.000001592 0.000000325 -0.000003069 -0.000003042 0.000000343 -0.000000606 -0.000000790 0.000002950 0.000001298 -0.000000258 -0.000000180 0.000000168 -0.000003866 -0.000001161 0.000000558 0.000001539 0.000000783 -0.000001832 -0.000002051 -0.000000328 -0.000002026 0.000000961 0.000006800 0.000005615 -0.000000366 0.000001996 -0.000000160 0.000001340 0.000003887 -0.000006495 -0.000022928 -0.000007670 -0.000421126 -0.000170037 -0.000001390 -0.000060584 -0.000022064 -0.000258829 -0.000115074 -0.000005528 -0.000047134 -0.000026715 0.000072352 0.000024426 0.000007406 0.000032050 0.000011775 0.000391216 0.000128154 0.000008070 0.000058678 0.000025446 0.000471135 0.000213987 0.000014380 0.000089736 0.000047796 -0.010294072 -0.016448150 0.000405724 0.001233362 0.001878251 -0.089131188 -0.013625872 -0.000971188 0.000046657 0.001620546 -0.014149406 -0.084843342 0.000691674 0.001918349 -0.004172559 -0.000062947 -0.000057591 -0.000021998 -0.000082696 -0.000025482 0.000030546 0.000021205 0.000003645 0.000017218 0.000004887 0.000014721 0.000014588 0.000007149 0.000025049 0.000006408 0.000065831 0.000059559 0.000009798 0.000049165 0.000014254 0.000079869 0.000027636 -0.000019001 -0.000026491 -0.000003258 -0.000076143 -0.000087913 -0.000030497 -0.000109318 -0.000027045 -0.000014987 -0.000027664 -0.000011210 -0.000036878 -0.000013654 -0.000022732 0.000042055 0.000042502 0.000110679 0.000026221 0.000038513 0.000055864 0.000020510 0.000069637 0.000010322 0.000076297 0.000049014 -0.000000079 0.000022848 0.000027657 0.000079913 -0.000027627 -0.000059840 -0.000135302 -0.000034612 -0.000070272 -0.000059925 0.000010213 -0.000003544 0.000025558 -0.000025412 -0.000011626 0.000003165 -0.000000367 -0.000004777 -0.000021894 0.000004040 0.000016229 0.000033766 0.000011872 0.000009408 0.000010199 -0.000002314 -0.000000863 -0.000007946 -0.000037838 -0.000021653 0.000002941 0.000001611 -0.000014993 -0.000019485 0.000017332 0.000017249 0.000043652 0.000002642 0.000030818 0.000011736 -0.000010272 -0.000009814 -0.000017421 -0.000024234 -0.000011251 0.000003496 0.000001696 -0.000005105 -0.000019205 -0.000002158 0.000008697 0.000018266 0.000003361 0.000022399 0.000014641 -0.000005088 -0.000003125 -0.000006991 -0.000058510 -0.000040289 0.000000797 -0.000016851 -0.000005608 -0.000098851 -0.000057074 0.000006226 -0.000013311 -0.000005690 0.000051930 0.000037182 0.000000745 0.000017466 0.000002942 0.000027685 0.000020081 -0.000000084 0.000009319 0.000003792 0.000019055 0.000010681 -0.000002258 0.000000039 0.000000575 -0.000039017 -0.000025220 0.000001625 -0.000008051 -0.000001041 0.000004458 0.000008234 0.000000846 0.000002874 0.000002869 0.000009542 0.000002958 -0.000008344 -0.000015592 -0.000007612 0.000013632 0.000002196 -0.000003867 -0.000005072 -0.000002155 0.000017818 -0.000000813 -0.000008445 -0.000014347 -0.000007440 0.000010928 0.000001172 -0.000005036 -0.000007677 -0.000004416 -0.000003462 -0.000002716 0.000001016 0.000000502 0.000002201 -0.000001451 0.000000170 0.000002233 0.000005556 0.000000899 -0.000010172 -0.000002708 0.000003347 0.000004194 0.000002450 -0.000001286 0.000001373 0.000000344 0.000001403 -0.000000961 0.000033198 0.000070964 0.000010247 0.000033122 0.000016891 0.000014206 -0.000016069 -0.000009009 -0.000020122 -0.000005677 -0.000018113 -0.000011223 0.000003357 0.000002193 0.000005012 0.000003715 0.000006347 0.000000990 0.000003153 0.000002229 0.000000618 -0.000000983 0.000002125 -0.000002726 0.000005678 0.000002026 -0.000003037 -0.000003511 -0.000006645 -0.000004969 -0.000007552 -0.000015771 -0.000004895 -0.000015556 0.000000606 -0.000007433 -0.000009899 -0.000001241 -0.000001815 -0.000000113 -0.000012896 0.000000384 0.000011075 0.000016646 0.000013954 0.000003447 -0.000001933 -0.000002231 -0.000005353 -0.000000077 0.000003539 0.000001469 -0.000001070 -0.000000975 -0.000000326 -0.000005114 -0.000000469 0.000002757 0.000004789 0.000002716 -0.000004170 -0.000000501 0.000001780 0.000003558 -0.000000395 -0.000003494 -0.000001244 0.000000829 0.000000697 -0.000000957 0.000000627 -0.000000224 -0.000000281 -0.000000762 0.000000719 0.000001778 0.000001135 0.000000173 0.000001297 0.000001533 -0.000001882 -0.000002253 0.000000495 -0.000000911 0.000001620 0.000001497 0.000000024 -0.000001542 -0.000003454 -0.000002239 -0.000003641 -0.000003847 -0.000000859 -0.000003599 -0.000001089 0.000003378 0.000001474 -0.000000810 -0.000000829 0.000000165 0.000005095 0.000002279 -0.000000506 -0.000000058 0.000000113 -0.000001785 0.000000247 0.000000369 0.000001169 0.000000577 0.000001620 -0.000000309 -0.000000887 -0.000002199 -0.000000552 0.000004978 0.000002983 0.000000221 0.000001425 0.000000252 -0.000001063 -0.000000658 -0.000000250 -0.000000441 0.000000104 -0.000005647 -0.000002860 0.000000744 0.000000352 -0.000000109 0.000000593 0.000000941 0.000000367 0.000001327 0.000000417 -0.000140668 0.000011854 -0.000003792 0.000017515 -0.000003085 -0.000044523 -0.000037439 -0.000005025 0.000024934 0.000009124 0.000142902 0.000001537 -0.000000088 -0.000019522 0.000000467 0.000047893 0.000013096 0.000001421 -0.000006779 -0.000001583 0.000089629 0.000000813 0.000002998 -0.000014619 -0.000002205 -0.000011235 0.000007512 -0.000000089 0.000005478 -0.000000390 -0.000002771 -0.000011104 -0.000000849 0.000003011 0.000001989 0.000005453 0.000003273 -0.000000629 0.000004810 0.000001612 0.000019494 -0.000000444 0.000000655 -0.000007559 -0.000002855 0.000029152 -0.000003525 0.000001550 -0.000013188 -0.000003244 0.000061501 -0.000005374 0.000003073 -0.000022868 -0.000003767 -0.000022071 -0.000003840 -0.000002010 0.000006509 0.000003320 -0.000003235 0.000010055 -0.000000438 0.000005848 0.000001160 -0.000019590 0.000007387 -0.000000757 0.000011347 -0.000000083 -0.000010073 -0.000000375 0.000000038 0.000000615 -0.000000997 0.000049691 0.000017715 0.000001863 -0.000006935 -0.000000286 0.000023274 -0.000004573 0.000001773 -0.000012106 0.000003569 -0.000021133 -0.000002722 -0.000001109 0.000010730 0.000003509 -0.000023756 -0.000002757 -0.000000322 0.000001602 0.000000122 -0.000009488 0.000001187 -0.000000607 0.000004588 0.000001246 -0.000014157 0.000002583 -0.000000276 0.000003021 0.000000441 -0.000006968 -0.000003446 0.000000537 0.000000971 0.000000356 0.000009601 0.000001698 -0.000000274 -0.000001234 -0.000000131 -0.000007210 -0.000001076 -0.000000093 0.000000969 0.000000453 -0.000078501 0.000000991 -0.000001490 0.000030335 0.000008865 -0.000078570 0.000020529 -0.000004967 0.000043707 0.000014234 -0.000015416 -0.000029370 0.000004468 -0.000016299 0.000002212 -0.000006756 -0.000004499 0.000000785 0.000000841 0.000000303 0.000005707 0.000000893 -0.000000039 -0.000001300 0.000001453 -0.000006119 -0.000003372 0.000000282 0.000000225 0.000000159 -0.000022024 -0.000014292 -0.000001080 0.000000579 -0.000000746 -0.000002382 0.000006685 -0.000000454 0.000002790 0.000001031 -0.000001214 -0.000015438 0.000000156 -0.000008912 -0.000000783 0.005899095 0.024900883 -0.000226556 -0.000391432 0.000765633 0.008117803 0.002606902 -0.000389987 -0.000028839 0.000547942 0.001177336 0.007491269 -0.000057117 -0.000580135 0.000566946 0.000961324 0.002876925 -0.000158474 -0.000276227 -0.000473320 0.005911213 -0.002560977 0.000107266 0.000144165 -0.000221807 -0.003487044 -0.002867823 -0.000090077 0.000201098 -0.000398847 -0.000866851 0.000048867 0.000047936 0.000073510 0.000133078 -0.000452049 -0.000424852 0.000045128 0.000037670 0.000129568 -0.000752105 -0.000937805 0.000069302 0.000188989 0.000392143 -0.001046951 -0.000820971 0.000043317 0.000229494 0.000301556 0.005333298 -0.003721116 0.000064245 0.000054041 -0.000234968 -0.003950921 -0.003541082 0.000051314 0.000023456 -0.000296164 -0.014359572 -0.028739811 0.000258117 -0.000138852 -0.000982368 0.003865495 -0.004981617 -0.000018951 0.000045616 -0.000414460 -0.002242811 0.002983087 -0.000036953 -0.000251364 -0.000250943 0.000775244 0.000984957 -0.000264237 -0.000354829 0.000311181 -0.003332999 0.000982434 -0.000328823 -0.000324690 0.000092205 0.001324902 -0.000115927 0.000239423 0.000551153 -0.000186476 0.000518108 0.000953457 0.000009320 -0.000039155 0.000025704 -0.000198111 0.000240941 -0.000061496 -0.000020283 0.000046002 0.000204102 0.000162823 0.000026232 -0.000006661 -0.000000629 0.000976789 0.000034278 -0.000164435 -0.000207653 -0.000196576 -0.000973281 0.000567805 -0.000039777 -0.000057761 -0.000061446 0.000246300 -0.000508411 0.000005601 0.000027422 0.000049411 -0.000432303 -0.001002812 0.000010891 0.000001619 -0.000030595 -0.000343213 -0.000086172 0.000023281 -0.000021957 0.000010319 0.000133913 0.000149364 -0.000009525 0.000007581 -0.000001733 0.000247215 0.000051868 0.000018966 0.000047977 -0.000027699 -0.003205318 0.001547808 -0.000032551 -0.000020768 0.000048798 0.001996684 0.000203193 0.000039390 0.000071881 -0.000029344 0.000032238 0.000000832 0.000000151 -0.000012740 -0.000002564 0.000013869 -0.000013736 0.000002243 -0.000014774 -0.000004683 -0.000000567 0.000019349 -0.000002731 0.000015360 -0.000000704 0.000051963 0.000004980 -0.000000286 -0.000016038 -0.000005581 0.000038933 -0.000008592 0.000002325 -0.000019513 -0.000008647 0.000032541 0.000012201 -0.000001053 -0.000002492 -0.000004327 -0.000156020 -0.000034206 0.000070122 0.000116925 0.000044607 0.000051563 -0.000007649 0.000021817 0.000042867 0.000035965 -0.000037380 0.000293359 0.000031959 0.000047597 0.000006128 -0.000308263 -0.000058511 0.000066681 0.000088335 0.000063391 0.000115609 -0.000005036 0.000019413 0.000034689 0.000012294 0.000333907 0.000369758 -0.000024917 -0.000020671 -0.000055886 -0.000036216 -0.000391577 0.000005892 -0.000004798 0.000020279 -0.000341599 -0.000312201 0.000003285 -0.000003552 -0.000010714 0.000143410 0.000186188 -0.000005618 -0.000007119 -0.000000126 0.000164545 -0.000469912 0.000010230 -0.000019838 0.000022627 0.000479719 0.001297492 -0.000001715 -0.000011389 -0.000073509 -0.000156689 -0.000242475 -0.000005798 0.000023257 0.000060502 0.000093829 -0.000014635 -0.000007681 0.000000346 0.000002682 0.000083980 0.000164472 -0.000001626 0.000002364 -0.000001315 -0.000032592 -0.000014463 0.000004481 -0.000001668 -0.000001448 0.000057861 0.000027321 -0.000000668 0.000002499 0.000003488 -0.000088239 -0.000013591 0.000006351 -0.000004061 -0.000004352 0.000011364 0.000010143 -0.000002793 -0.000001384 -0.000001643 -0.000012284 -0.000032105 -0.000000803 0.000002282 0.000002862 0.000011765 0.000004994 0.000000652 -0.000003502 -0.000000479 0.000013837 0.000023653 -0.000000619 -0.000000609 -0.000000204 -0.000004020 -0.000001578 -0.000002320 0.000003758 0.000002113 -0.000008329 -0.000001188 0.000001570 -0.000000754 -0.000000099 0.000007469 -0.000001772 -0.000000020 -0.000001913 0.000000098 0.000349119 0.000242933 -0.000001161 0.000002288 0.000006600 0.000062830 0.000053757 -0.000012109 0.000008049 0.000002561 -0.000179275 0.000041077 0.000025400 -0.000015972 -0.000010481 -0.000061077 -0.000001947 0.000014432 -0.000004700 -0.000011484 -0.000079568 0.000035159 0.000007508 0.000000203 0.000001746 0.000076495 0.000010774 -0.000004455 0.000002902 -0.000003874 0.000050885 -0.000022274 -0.000002222 -0.000001009 -0.000012104 -0.000115204 0.000009390 0.000008759 -0.000006940 -0.000008429 0.000070514 -0.000018236 -0.000031660 0.000015873 0.000011101 -0.000020245 -0.000017134 -0.000002388 0.000002215 0.000005000 -0.000008646 -0.000007791 -0.000000788 0.000002846 0.000001507 -0.000018870 -0.000023153 -0.000000309 -0.000000462 -0.000000193 -0.013642812 -0.003943367 -0.004234904 -0.000187580 -0.002029824 -0.044593213 -0.014172733 -0.001792954 0.001615295 -0.001918533 -0.019602459 -0.010693299 -0.002321137 -0.001245292 0.003445506 -0.067233068 -0.029540752 -0.011481831 -0.001813428 -0.005145122 -0.000609478 -0.007064776 0.024793338 0.003762768 0.004578472 -0.016634117 -0.001183290 0.006028271 -0.000283579 0.004642524 0.017882315 0.006492016 -0.000376532 -0.000412515 0.000003719 0.008472457 0.002793350 0.001479663 -0.000058669 0.000285963 0.008511083 0.002234656 0.000347508 -0.000135901 0.000003709 0.003362717 0.000657704 0.000043317 -0.000099109 0.000047188 -0.021232338 -0.007462982 0.000090798 0.000407772 -0.000032101 -0.006646967 -0.002205277 0.000101641 0.000167787 -0.000130527 -0.000040588 -0.000017394 -0.000393416 0.000007911 -0.000109367 0.000155787 0.000145825 -0.000029229 0.000036202 -0.000079521 0.000326073 -0.000069403 -0.000213593 -0.000083787 0.000142038 -0.000066400 -0.000052272 0.000014677 0.000024055 -0.000003890 -0.000339751 -0.000159730 -0.000070914 0.000008240 -0.000031099 -0.000020726 0.000099915 -0.000021667 -0.000018146 0.000037892 0.021033404 0.005760655 0.000837467 -0.002162168 0.000304059 0.017921019 0.005069289 0.001563602 0.000382346 0.001797722 0.009792061 0.008828667 0.001366774 0.000760171 -0.002425314 -0.021614381 -0.007667562 0.000256150 0.000471897 -0.000049715 0.010550466 0.004233774 -0.000330202 -0.000098072 0.000008421 -0.002519330 -0.001030014 -0.000058023 0.000166907 -0.000043675 0.000488768 0.000223266 -0.000318473 0.000327802 -0.000005693 0.000164585 -0.000075588 -0.001230588 0.000021114 -0.000277675 -0.000062289 -0.000085267 -0.000512594 0.000000247 0.000111835 -0.000298292 0.000012413 -0.000004118 0.000069776 -0.000042624 0.000078311 0.000174380 -0.000001462 0.000028558 -0.000048771 0.000171101 -0.000502382 -0.000037409 -0.000042187 0.000159818 0.000006488 0.000004043 0.000001986 0.000007042 0.000001673 -0.000011857 -0.000008377 0.000000974 -0.000000140 0.000000976 0.000014876 0.000008556 -0.000000770 0.000000716 0.000001432 -0.000001061 0.000000138 0.000000208 0.000001038 0.000000308 -0.000007610 -0.000004307 0.000000946 0.000000899 0.000000047 -0.000000752 -0.000000575 -0.000000078 -0.000000361 -0.000000127 -0.000000293 0.000000554 -0.000000336 -0.000001589 -0.000001578 0.000005633 0.000003673 -0.000000669 -0.000000112 -0.000000365 -0.000000332 -0.000000357 -0.000000248 -0.000000772 -0.000001218 0.000000978 0.000000252 0.000000205 0.000001268 0.000001018 0.000004761 0.000002106 -0.000000823 -0.000002019 -0.000000907 0.000001505 0.000000972 -0.000000023 0.000000798 0.000000241 0.000006250 -0.000005682 0.000001033 0.000002587 0.000000432 -0.000006416 -0.000010109 0.000000725 -0.000000393 -0.000000142 -0.000001254 0.000000667 -0.000001118 -0.000001715 -0.000000045 -0.000004124 0.000003720 -0.000003113 -0.000007526 -0.000003875 -0.000004361 0.000000800 -0.000001642 -0.000003623 -0.000000811 0.000002620 0.000000993 -0.000004222 -0.000008944 -0.000003736 0.000029324 0.000017519 0.000003396 0.000013945 0.000006045 0.000004935 0.000005007 -0.000002775 -0.000004579 -0.000001658 -0.000021034 -0.000019984 0.000003258 0.000002477 0.000000844 0.000009695 0.000001767 0.000002021 0.000006323 0.000002498 0.000027992 0.000016522 0.000001346 0.000007286 0.000002961 0.000027419 0.000014948 0.000001130 0.000006796 0.000003818 0.188015351 0.141086418 0.445722765 0.036484399 0.005899845 0.240014616 -0.000256500 0.025973501 -0.018091342 0.487716429 0.010732354 -0.012059596 0.017437403 -0.013475836 0.123643403 -0.013884978 0.018217020 -0.018008624 -0.056369194 -0.009066147 -0.052694850 -0.033826379 0.023846587 -0.140922326 -0.002496794 -0.023176031 -0.105922543 0.071586303 -0.005639410 -0.038374434 0.021619574 0.057096603 -0.123778767 -0.051854476 -0.005166545 -0.005054990 -0.005182003 0.011410377 -0.038885732 0.006761407 -0.016309097 -0.001480406 0.016757427 0.004431293 0.006472536 0.021091018 0.013765561 -0.009140559 -0.010045553 0.001312278 0.004821863 -0.010023951 -0.002579950 -0.011320921 -0.017637345 -0.015213847 -0.046846700 -0.013340841 -0.014252550 -0.002181620 0.001529133 0.009268495 0.008977902 -0.025755760 -0.017696042 0.001006547 0.003393987 0.000660114 0.001227673 0.000821279 0.002797545 0.009097941 0.001098509 0.005802338 0.001759993 0.000132770 0.000280860 -0.000115164 -0.000196626 0.000004285 -0.000009327 0.000017011 0.000000434 -0.000030105 0.000013417 -0.000034439 -0.000083596 -0.000007322 -0.000094031 -0.000027294 -0.000037232 -0.000083099 -0.000005239 -0.000083467 -0.000023461 0.000035010 0.000025480 -0.000002423 0.000103239 0.000006844 -0.000061760 0.000013951 0.000180492 -0.000035931 0.000027576 -0.000026672 -0.000042732 0.000006728 -0.000095229 -0.000012327 -0.000328434 -0.000747501 0.000022486 -0.000567753 -0.000097569 -0.000044237 -0.000448578 -0.000293837 -0.000156819 -0.000155048 0.000677922 0.001420756 -0.000090388 0.001353313 0.000207938 0.000062811 0.000058539 0.000019413 0.000201044 -0.000007956 -0.000214741 -0.000669405 -0.000267019 -0.000791176 -0.000259688 -0.000052702 -0.000275568 -0.000231099 -0.000228892 -0.000074333 0.000067473 0.000079322 -0.000010383 0.000156497 -0.000018837 -0.000102997 -0.000288843 -0.000142477 -0.000330082 -0.000047338 -0.000105559 -0.000144232 0.000094010 -0.000178280 -0.000020597 0.000066295 -0.000000096 0.000005060 0.000152478 -0.000074180 0.000080092 0.000146092 -0.000034074 0.000165817 0.000043592 -0.000051469 -0.000145813 0.000018011 -0.000076455 0.000001360 -0.000018851 -0.000035275 -0.000039565 -0.000215587 -0.000017640 0.001341770 0.003934448 0.001509766 0.004123322 0.001145981 -0.000026922 0.000059197 0.000220863 -0.000270352 -0.000078276 -0.000040024 -0.000020496 -0.000011252 -0.000110872 0.000001895 0.000021088 0.000055761 0.000036821 0.000062235 0.000013563 -0.000013852 0.000027395 0.000056217 -0.000010607 0.000011477 -0.000011623 0.000012055 -0.000001506 -0.000035394 0.000013848 -0.000035749 -0.000081120 -0.000013298 -0.000079749 -0.000014549 -0.000022093 -0.000029257 0.000002922 -0.000049493 0.000005298 -0.000064539 -0.000037789 -0.000025888 -0.000175452 0.000054842 0.000011757 0.000020704 -0.000044214 -0.000015270 0.000015267 -0.000015511 0.000013413 -0.000013514 -0.000054413 0.000029240 -0.000520941 -0.003495817 -0.000637519 -0.000476656 -0.001157995 -0.001436697 -0.005154169 -0.000808535 -0.002699468 -0.001023287 -0.000279805 0.000262896 0.000350951 -0.000249265 0.000355744 0.000217336 0.003827696 0.000365924 0.000241338 0.001686938 -0.000040774 -0.000489219 -0.000002246 0.000071280 -0.000143289 -0.000176535 -0.001367189 -0.000638367 -0.000419764 -0.000420055 -0.000118605 -0.000530791 -0.000051706 -0.000230603 -0.000133302 -0.000063367 -0.000094606 -0.000007605 -0.000123211 0.000014057 0.000022694 0.000015712 0.000043339 0.000043984 -0.000017819 -0.000026399 -0.000261589 0.000023076 0.000017982 -0.000100363 -0.000052125 0.000221666 0.000038599 -0.000036459 0.000171897 0.000337034 0.000389217 -0.000309138 0.000475285 -0.000013275 0.000052316 0.000022261 0.000002366 0.000107417 -0.000030246 0.000049972 0.000065291 -0.000059453 0.000118157 0.000020477 -0.000107606 -0.000085938 0.000167152 -0.000141089 -0.000010330 -0.000024296 0.000001079 0.000097049 -0.000019887 0.000007661 -0.000160248 -0.000083163 0.000211552 -0.000272287 0.000079630 0.000039797 -0.000019140 -0.000008936 0.000125157 -0.000026845 -0.000143962 -0.000163661 -0.000045448 0.000081393 0.000004390 -0.000180273 0.000294629 0.000505769 -0.000061713 0.000284982 -0.000514670 -0.000317966 0.000466403 -0.000725306 0.000150970 0.000009745 -0.000157888 0.000025337 0.000010039 -0.000093037 -0.000092638 -0.000342282 -0.000075556 -0.000157102 -0.000131918 0.000272005 0.000296034 -0.000172091 0.000535915 -0.000080884 -0.000058414 -0.000069585 0.000047518 -0.000104310 -0.000000161 -0.000163392 -0.000147540 0.000140942 -0.000336857 0.000049855 0.000007952 0.000057846 0.000047479 0.000021458 0.000006139 -0.000058939 -0.000037481 0.000005731 -0.000148138 0.000041786 -0.000059928 -0.000060308 0.000058717 -0.000110533 0.000015032 0.000012102 0.000001821 -0.000029942 0.000008994 -0.000005956 0.000503805 0.000759326 -0.000146529 0.000852617 0.000155583 0.001331472 0.001025815 -0.001197382 0.002389569 -0.000458333 0.000132531 -0.000366220 -0.000471987 -0.000270176 -0.000233713 0.000025819 0.000123394 -0.000090459 0.000070005 0.000033972 0.000163888 0.000132551 -0.000082975 0.000210392 -0.000059731 -0.000460593 -0.000445868 0.000338034 -0.000636635 0.000050804 -0.000028758 -0.000012401 -0.000005879 -0.000071409 0.000021397 -0.000045528 -0.000067739 0.000032232 -0.000080024 -0.000002812 0.000020681 0.000034690 0.000005197 0.000047520 -0.000000530 -0.000036069 -0.000016590 -0.000001386 -0.000073826 0.000019188 -0.000017470 -0.000046923 0.000008477 -0.000024709 -0.000014660 0.000071606 0.000128208 -0.000023713 0.000124214 0.000016968 0.000151330 -0.000448972 -0.000095997 0.000269899 -0.000079211 -0.001597509 -0.004649765 -0.001652384 -0.005238372 -0.001611764 -0.001410817 -0.004195238 -0.000042247 -0.004976333 -0.001982390 0.000014661 0.001103452 0.000262855 -0.000385245 -0.000298531 0.001510079 0.004205596 0.001314899 0.004261205 0.001366228 0.002815649 0.008306841 -0.000126108 0.009056331 0.003631141 -0.003478119 -0.006384306 -0.001206189 -0.000984334 -0.000612650 0.001309735 -0.000780569 0.001139717 -0.000849469 0.000103340 0.001101411 -0.000343294 -0.002495635 -0.000165303 -0.000160546 -0.000199265 -0.002521394 -0.000270774 -0.000306829 -0.001074615 0.000126338 0.000664130 0.000108030 0.000252970 0.000238821 -0.000041924 0.000664465 0.000149366 -0.000133763 0.000355743 0.000317617 0.001722331 0.000165791 0.000534870 0.000621056 0.000504104 0.000432305 -0.000129211 0.000999025 -0.000079673 -0.000184956 -0.003000384 -0.000479060 -0.000244491 -0.001313022 -0.000174999 -0.000993506 0.000038211 -0.000282828 -0.000348896 -0.000280831 0.001907816 0.000323529 -0.000677787 0.001043249 -0.000024349 0.001612566 0.000415684 -0.000123907 0.000783955 0.000975054 0.001803883 -0.000552673 0.001937896 0.000180021 0.000604835 -0.001798052 -0.000375099 0.001359894 -0.001184093 0.000112320 -0.000172817 -0.000569219 0.000391878 -0.000281112 -0.000237620 -0.000384641 0.000103696 -0.000449852 -0.000036779 -0.000073654 0.000499812 0.000031493 -0.000141344 0.000247614 -0.000058041 -0.000067214 0.000118398 -0.000133001 0.000026777 -0.000693822 -0.000776706 0.000620097 -0.001514429 0.000184861 -0.000166099 0.000431773 0.000030190 -0.000475535 0.000281165 -0.000099861 -0.000202317 0.000306722 -0.000267262 0.000053428 -0.000281564 -0.000366174 0.000167241 -0.000572703 0.000016916 -0.000174935 0.000134739 0.000107822 -0.000386700 0.000177028 0.000019099 0.000046152 0.000108124 -0.000017715 0.000050959 -0.000298595 -0.000961321 -0.000078568 -0.000547119 -0.000289519 -0.000511840 -0.001371249 -0.000120668 -0.000992892 -0.000358969 0.000230401 0.000845938 0.000147245 0.000437930 0.000273476 0.000162556 0.000511852 0.000006449 0.000292826 0.000153687 0.000109402 0.000223519 0.000002554 0.000204335 0.000046038 -0.000179915 -0.000554812 -0.000081289 -0.000335580 -0.000162821 0.000064135 0.000136371 -0.000016412 0.000123631 0.000019390 -0.000024490 -0.000277623 0.000035886 -0.000065785 -0.000085591 0.000066622 0.000025670 -0.000003603 0.000127812 -0.000017444 0.000007685 -0.000201327 0.000030383 -0.000001135 -0.000067990 0.000007247 -0.000086907 0.000031834 -0.000002329 -0.000022932 0.000009405 0.000005471 -0.000017793 0.000026575 -0.000010559 -0.000026282 0.000078115 0.000022509 -0.000055639 0.000052991 -0.000012853 0.000024759 -0.000023923 -0.000013475 0.000002921 -0.000043334 -0.000023138 0.000039826 -0.000095476 0.000024023 0.000985413 0.001248403 -0.000927873 0.002247981 -0.000248589 0.000004199 -0.000309208 0.000112886 0.000172966 -0.000076223 0.000011499 0.000045764 -0.000193904 -0.000153022 -0.000000556 0.000099943 0.000132843 -0.000117409 0.000119104 -0.000006979 -0.000008077 -0.000033636 -0.000017243 0.000009894 -0.000036625 -0.000077160 -0.000162791 0.000123112 -0.000071440 -0.000017699 -0.000074636 -0.000175805 0.000128154 -0.000157028 -0.000001921 0.000021388 0.000030974 0.000004311 0.000030974 0.000013072 0.000025503 0.000280789 -0.000119160 0.000124758 0.000047470 0.000029411 -0.000047355 -0.000018082 0.000067209 -0.000040054 0.000020564 0.000016380 -0.000005697 0.000038785 -0.000002155 -0.000020452 0.000061386 0.000001901 -0.000039955 0.000034773 -0.000060959 -0.000005994 0.000045984 -0.000134385 0.000040714 -0.000038156 -0.000046300 0.000021957 -0.000077693 0.000003063 0.000045354 0.000023268 -0.000045536 0.000103402 -0.000026036 0.000035742 0.000073124 -0.000031434 0.000070675 0.000009004 0.000002488 -0.000013804 -0.000015775 0.000014941 -0.000014276 -0.000018360 -0.000084633 0.000029104 -0.000034847 -0.000023284 -0.000020115 -0.000111389 -0.000001204 -0.000031376 -0.000042048 0.000021928 0.000023976 -0.000008385 0.000040719 0.000000734 0.000023376 0.000054616 0.000014550 0.000049469 0.000010747 0.000004021 0.000014501 -0.000025646 -0.000001814 0.000006636 0.000009903 -0.000025834 0.000000994 0.000024602 -0.000019153 0.000018143 0.000074242 0.000016226 0.000037682 0.000023990 -0.000003558 -0.000016902 -0.000009191 -0.000011035 -0.000003996 -0.000031367 -0.000055011 0.000000320 -0.000060442 -0.000009176 0.000001808 0.000033052 0.000005796 0.000002454 0.000014698 -0.000583609 -0.001025235 -0.000092959 -0.002910289 0.000627663 -0.000721944 -0.000197785 -0.000130322 -0.006334048 -0.000208438 0.000447467 0.000263058 0.000052021 0.000929697 -0.001139269 0.000261768 0.000414092 0.000085626 0.001060570 0.000846344 0.000347346 0.000413230 -0.000043923 0.001810452 0.001739795 0.000013365 0.000230014 -0.000094772 -0.000058880 0.000631609 -0.000023357 0.000011771 0.000051175 -0.000500274 -0.000610645 0.000022048 0.000078025 0.000131672 -0.000267472 -0.000982659 0.000103575 -0.000013292 0.000022598 0.000592050 0.000770206 0.000221978 -0.000034016 0.000077967 0.000949379 -0.000243786 0.000449869 0.000066893 0.000122182 0.001530600 -0.000845677 -0.000108759 -0.000083260 0.000031177 -0.000766780 -0.001277245 -0.000022497 0.000253464 -0.000173721 -0.000087780 0.001528834 -0.000126107 0.000096035 -0.000036783 -0.000075350 0.001328036 0.000003992 -0.000132198 0.000096685 -0.000186578 0.000179880 0.000322385 0.000430076 -0.000044584 0.001648545 0.001574499 0.000171051 0.000123253 -0.000135192 0.001532407 -0.004958951 -0.000416321 0.000120194 -0.000457646 -0.002023235 0.002819503 -0.000132766 -0.000231715 -0.000049402 -0.000326339 -0.000062430 -0.000063375 0.000013304 0.000037682 -0.000258643 0.000024227 -0.000058299 -0.000061869 0.000028312 -0.000172150 -0.000058803 -0.000049575 -0.000067551 -0.000014893 -0.000121772 -0.000004720 0.000052180 0.000066748 0.000023797 0.000174802 0.000025643 -0.000031938 -0.000032745 -0.000024833 -0.000108306 0.000012979 -0.000556164 -0.000032003 -0.000155768 -0.001714035 0.000565033 -0.000563291 0.000355671 -0.000295295 -0.002203511 0.001074880 0.000056660 -0.000481670 -0.000101553 0.000455583 -0.000587832 -0.000071497 -0.000075961 -0.000000396 -0.000147462 0.000050288 0.000050282 0.000048534 -0.000029074 0.000239581 0.000016500 -0.000050808 -0.000068734 0.000014351 -0.000147114 -0.000014391 -0.000156174 -0.000322679 0.000137727 -0.000470283 0.000018489 -0.000000543 -0.000003779 0.000005720 0.000791303 -0.002240933 0.000151988 -0.000368094 0.000321078 0.000279849 -0.000391031 0.002764847 0.001161411 0.000784811 0.000532359 0.000180659 0.000217398 -0.000012681 0.000048465 -0.000013373 -0.000006552 -0.001331905 0.000161565 -0.000005041 -0.000372954 0.000023425 -0.001634628 0.000115911 -0.000517742 0.000109043 -0.000068751 -0.000528053 -0.000288042 -0.000210397 0.000033156 -0.000046185 -0.000629768 -0.000235947 0.000239268 -0.000085114 -0.000080532 0.000283748 0.002046816 -0.000057948 0.000238350 0.000449380 0.000360154 0.000284636 -0.000137279 -0.000020135 0.000073790 0.001578283 -0.000452800 0.000149299 0.000081380 -0.000036128 0.001652995 -0.000873885 -0.000168469 0.000242040 -0.000188484 0.001066501 -0.000162096 0.000524459 0.000308513 -0.000028489 -0.000479474 0.000729015 0.000592174 0.000112125 0.000024856 -0.002952660 0.003536174 -0.000159643 0.000302018 0.000217501 0.002843438 0.000119717 0.000217820 0.000240699 0.000105507 -0.001588116 0.001685909 -0.002711265 -0.000023571 0.000304384 -0.000126719 -0.000285686 -0.000077471 -0.000082423 -0.000060351 -0.000103948 -0.000097946 0.000225112 -0.000221565 0.000022460 0.000204365 0.000227930 0.000139498 0.000112774 0.000043816 0.000084741 0.000117143 0.000006939 0.000068917 0.000003697 -0.000076981 -0.000111228 0.000050775 -0.000107063 -0.000009992 0.000001223 0.000008628 0.000005212 -0.000002604 -0.000002879 0.000403736 -0.002922977 0.000567401 0.000522651 -0.000884785 -0.000073157 -0.000725851 0.000132188 -0.000074812 -0.000233388 0.000314571 0.000073263 -0.000264504 0.000404605 -0.000045097 0.000175727 0.000209729 0.000139714 0.000082632 0.000016554 -0.000045644 -0.000177759 0.000065751 -0.000088543 -0.000029552 0.000057752 0.000100034 -0.000034134 0.000087133 0.000011111 -0.000964430 0.000536408 -0.000453936 -0.000042278 -0.000078303 0.000094563 -0.000656949 0.000111112 -0.000319230 -0.000014587 0.001072243 -0.000652587 0.001673761 0.000347757 -0.000239069 0.000253089 0.000039390 0.000021319 0.000753449 -0.000236559 0.000129631 -0.000238737 0.000098757 0.000585269 -0.000366245 -0.000122082 0.000294393 0.000075602 -0.000563010 0.000361987 0.000348074 0.000113514 0.000130204 0.001021101 -0.000364814 0.000252884 -0.000181498 0.000204393 0.000983863 -0.000577398 0.000145197 0.000201254 0.000132573 0.000410675 -0.000020377 -0.000173310 0.001032947 -0.000222919 -0.000283268 0.000347501 0.000036754 0.000514204 -0.000033466 0.000031380 0.000157056 -0.000077527 0.000425473 0.000161670 -0.000229551 0.000158697 -0.000290935 0.001229811 -0.000453320 -0.000214086 0.000374253 0.000078117 0.000461226 -0.000139029 0.000169176 0.000118308 -0.000034153 -0.000691803 0.000355809 -0.000176980 -0.000145366 0.000155045 -0.000081598 -0.000287471 -0.003021986 0.000832981 0.000470611 -0.000529742 -0.000505763 -0.000725473 0.001907197 -0.000135436 -0.000233788 0.000347616 0.001449299 -0.000996007 0.000515921 -0.001436739 -0.000879235 0.005995307 0.002190682 0.000533067 0.002764291 -0.001007709 -0.005360430 -0.004952509 -0.001396880 0.000573990 0.000557991 0.002041487 -0.000057301 -0.000233847 -0.000482665 0.000310425 0.001734062 -0.001111353 -0.000066715 0.000554409 -0.000018823 -0.000737206 0.000003668 0.000190741 0.000230228 -0.000115866 -0.001205782 0.000611296 -0.000044051 0.000337070 -0.000147185 -0.001620301 0.000077242 0.000347658 0.000222306 -0.000283645 -0.000890852 0.001215726 -0.000047038 -0.000278401 0.000175407 0.001499517 -0.000397146 -0.000073972 -0.000116370 -0.000010101 -0.000199858 -0.000120218 0.000052751 0.000019780 0.000016999 0.000281199 -0.000000708 0.000001810 0.000010169 -0.000011715 0.000048515 0.000063587 -0.000063221 -0.000062404 -0.000020764 -0.000130833 -0.000009665 0.000020267 0.000055749 -0.000010481 -0.000061425 0.000059954 0.000033478 -0.000013523 -0.000002714 0.000156463 -0.000004301 -0.000241874 0.000600148 -0.000036159 -0.002050463 -0.001954621 -0.000242148 -0.000646351 0.000170677 0.001879535 -0.000180490 0.000427094 -0.000085909 -0.000046523 0.000968464 0.001665613 0.000299901 0.000186549 -0.000222863 -0.000914004 0.000942870 -0.000189220 0.000118070 0.000223775 0.000443614 -0.001044022 -0.000153064 -0.000083906 0.000165578 -0.000030823 -0.000334545 0.000142847 0.000288643 -0.000070718 0.000075174 0.000081573 0.000153375 0.000385278 -0.000042495 -0.000218908 0.000168846 -0.000205007 -0.000580808 -0.000136634 0.000324560 -0.000113378 -0.000033635 0.000035748 -0.000047247 -0.000339560 -0.000099270 -0.000040629 0.000011576 -0.000023223 -0.000200845 0.000014867 0.000007214 -0.000065275 0.000010652 0.000244962 0.000040600 -0.004879500 -0.001417155 -0.001970444 0.002161562 0.000290925 0.006722626 0.005065225 -0.001766376 -0.002156875 0.001563888 0.000915036 -0.001689143 0.007830606 -0.000016307 0.001468248 0.001158790 -0.002983733 -0.000361094 -0.000148975 0.000774163 -0.001111938 -0.002415130 -0.000290423 0.000187275 -0.000123513 -0.000040299 -0.001030878 -0.000785254 0.000339012 -0.000113133 -0.000902579 0.001163284 0.000110578 -0.000440712 -0.000267107 -0.002946564 -0.001796554 -0.000159996 0.000704870 -0.000518490 -0.001488412 -0.000232298 -0.000033161 -0.000057644 -0.000368330 -0.000353369 0.000272415 0.000427411 0.000155305 -0.000107316 0.000833812 -0.001473055 0.000039959 0.000284978 0.000338537 0.000252096 -0.000061763 -0.000478310 0.000105960 0.000119859 0.000072680 -0.000304436 -0.000009813 0.000608241 -0.000031205 0.000051816 0.000113493 -0.000042256 0.000161503 0.000016811 -0.000038646 -0.000281164 0.000149938 0.000396005 -0.000067063 -0.000190591 -0.000325001 -0.000022559 0.000019091 -0.000060885 -0.000196206 -0.000186010 -0.000009282 0.000032055 -0.000024197 -0.000093641 -0.000133178 -0.000014351 0.000047747 -0.000017862 -0.000373370 0.000516811 0.000233548 0.000147470 -0.000319299 -0.000064389 0.002342753 0.000381056 -0.000752124 0.000073754 -0.000026310 0.001042215 -0.000390856 -0.000257149 -0.000038497 0.000325698 -0.002150141 -0.000272413 0.000513174 0.000161973 -0.000985505 -0.000996605 -0.000335900 0.000158274 -0.000288636 -0.000274679 -0.001048878 -0.000067903 0.000183379 -0.000066683 0.000012356 0.000178878 -0.000002604 -0.000021170 0.000028822 -0.000244018 -0.000234535 -0.000061018 -0.000129761 -0.000032400 -0.000064798 -0.000041000 -0.000014229 0.000000394 -0.000002323 -0.000012937 -0.000149637 -0.000008538 0.000024902 -0.000022913 -0.000077677 -0.000087964 -0.000012357 -0.000093175 -0.000028795 -0.000048924 -0.000105283 0.000025242 -0.000002024 -0.000030381 -0.000002115 0.000200921 0.000062750 -0.000000567 0.000094551 -0.000059437 -0.000069020 -0.000048060 -0.000134034 0.000007334 0.000111251 0.000194123 -0.000017214 0.000223712 0.000023672 -0.000008930 0.000014353 -0.000001792 -0.000027464 0.000013484 -0.000049590 -0.000056757 -0.000001054 -0.000102361 0.000001443 -0.000009999 -0.000013301 0.000002674 -0.000023809 0.000001717 -0.000010982 -0.000062978 0.000022935 -0.000021218 -0.000024635 0.000019883 0.000039189 0.000022453 0.000037364 0.000009505 -0.000022445 -0.000047352 0.000031958 -0.000036373 -0.000008365 0.000009235 0.000056408 -0.000013766 0.000017446 0.000022338 0.000023654 -0.000014261 0.000014774 0.000059000 -0.000019352 0.000003711 0.000029626 0.000007642 0.000009669 0.000013987 -0.000000142 0.000076563 0.000086947 0.000001636 0.000077593 0.000010573 -0.000048552 -0.000145129 0.000013496 -0.000071064 0.000123172 -0.000091920 -0.000061700 0.000098261 -0.000161083 -0.000055994 -0.000311688 0.000089595 -0.000237396 -0.000113718 -0.000047232 -0.000125166 0.000023965 -0.000153804 -0.000012636 -0.000042921 -0.000185976 0.000056688 -0.000094065 -0.000034661 0.000265911 0.000592171 -0.000147201 0.000620495 0.000053134 0.000065447 -0.000092070 -0.000036011 0.000118883 -0.000074729 -0.000093165 -0.000154014 -0.000106342 -0.000211653 -0.000060435 0.000033067 0.000289975 0.000006916 0.000150760 0.000112446 0.000136883 0.000355120 0.000101026 0.000321653 0.000110335 0.000162846 0.000527272 -0.000047068 0.000493910 0.000170122 0.266644904 -0.070280253 0.691198405 -0.000493607 -0.039632986 0.663184074 -0.104483586 -0.220586001 0.228593711 0.690916390 0.019038781 -0.352375812 0.093975853 0.247622393 0.389078887 -0.002509765 0.096359543 -0.094055172 -0.085916020 -0.102688124 0.008359513 0.253150449 -0.086308411 -0.275222103 -0.281221123 -0.018348184 -0.062254368 -0.005557945 -0.000024947 0.006379479 -0.008986620 -0.002087065 -0.334942279 -0.199039301 0.002148842 -0.008170084 0.001783701 -0.202467751 -0.207991537 0.007157679 0.000437317 0.000163412 -0.008054336 -0.007286838 -0.001661939 0.002353039 -0.003597032 -0.024282743 -0.018092840 -0.002061136 -0.000542424 -0.000844698 -0.003957726 -0.000215412 0.000009701 0.000003672 0.000057005 -0.000025503 -0.000010498 -0.000024615 -0.000015594 0.000083964 0.000222955 0.000108967 0.000005764 -0.000003678 0.000093532 0.000188990 0.000075070 -0.000011345 0.000003049 -0.000123181 -0.000121908 -0.000028297 0.000021122 0.000139858 0.000324239 -0.000242133 -0.000603180 -0.000288860 -0.000026664 0.000098830 0.000211724 0.000096948 0.000000658 -0.000041310 0.000742002 0.001762989 0.000851807 -0.000148603 -0.000190458 -0.000367533 0.001312127 0.001360924 0.000469888 0.000096137 -0.001913383 -0.003251912 -0.001492430 0.000454181 0.000022090 -0.000288036 -0.000262105 -0.000131702 0.000045545 -0.000347423 0.000364493 0.002211104 0.001638274 0.000404935 -0.000187912 -0.000031809 0.000725351 0.000898792 0.000253568 0.000007346 -0.000266427 -0.000138298 -0.000056185 0.000097250 -0.000160075 0.000223133 0.000792384 0.000799902 0.000117622 0.000063331 0.000390049 0.000161378 -0.000227867 -0.000202862 0.000008327 -0.000350304 0.000048001 -0.000016184 0.000161197 -0.000014944 -0.000255759 -0.000294155 -0.000015476 0.000076753 -0.000022659 0.000106631 0.000331767 0.000202250 -0.000024065 -0.000055662 0.000149833 0.000341586 0.000253850 0.000000947 0.001714251 -0.002630391 -0.011129532 -0.008990614 -0.001670462 0.000026581 0.000317340 0.000696158 -0.000404996 -0.000112868 -0.000003627 0.000144721 0.000060357 0.000045194 -0.000034524 0.000017915 -0.000037989 -0.000110149 -0.000119349 -0.000014238 0.000042212 0.000091876 -0.000061736 -0.000154262 -0.000071192 0.000002063 0.000069466 -0.000027983 -0.000012143 -0.000031570 -0.000015036 0.000094606 0.000175169 0.000103111 -0.000011267 -0.000005572 0.000083596 0.000062360 0.000035126 -0.000027811 -0.000044142 0.000310591 0.000051865 0.000126084 -0.000104511 -0.000046629 -0.000032265 0.000015200 0.000165084 0.000052045 -0.000020190 0.000106642 -0.000032553 0.000046109 -0.000038626 -0.000711899 -0.002338183 0.007861787 0.007006729 0.002509925 -0.001344292 -0.000074219 0.011483415 0.010663828 0.001470069 0.000659380 0.001876211 -0.000017023 -0.001372930 -0.001199341 0.000738633 0.003315147 -0.010743475 -0.006263953 -0.003346901 -0.000030322 -0.000655314 0.000313655 0.000423036 0.000372396 -0.000863253 -0.001187057 0.003582495 0.005215413 0.001173467 -0.000124627 -0.000054562 0.001219499 0.000859502 0.000232387 -0.000017173 0.000209715 0.000150191 0.000148899 -0.000076629 0.000048450 -0.000000914 0.000064837 -0.000293458 0.000019864 -0.000034916 -0.000135633 0.000648476 0.000172012 0.000308987 -0.000055369 0.000692838 -0.000822187 -0.000298133 -0.000601386 -0.000099636 -0.001838131 -0.000234130 0.001557271 0.001062318 0.000052638 -0.000256004 -0.000115553 -0.000045085 0.000107402 -0.000052817 -0.000329737 -0.000177021 0.000422101 0.000167046 0.000235867 0.000243974 -0.000441874 -0.001045814 -0.000145080 0.000100000 0.000194805 -0.000244064 -0.000552551 -0.000224437 0.000179727 0.000948486 -0.000260404 -0.001267534 -0.000441623 -0.000048215 -0.000143036 0.000082661 0.000277930 -0.000009294 0.000036802 -0.000082433 0.000394104 0.000219470 0.000670666 0.000199744 0.000934174 -0.004397379 -0.002477837 -0.002605508 0.000236510 0.002675159 0.000040037 -0.003026785 -0.001094873 0.000028715 -0.000079049 0.000616965 0.000016921 0.000152378 -0.000273259 0.000735132 0.001763373 0.000789481 -0.000263559 -0.000180629 -0.001390138 -0.000024553 0.001026788 0.000367365 0.000033230 0.000294375 0.000105127 -0.000260703 -0.000105821 0.000105030 0.000829323 0.000099457 -0.000856661 -0.000301184 0.000082969 -0.000028334 -0.000244508 -0.000398412 -0.000026284 -0.000015051 0.000308022 0.000028676 -0.000022357 -0.000139522 0.000039139 0.000344027 0.000050737 -0.000306237 -0.000154162 -0.000012682 -0.000115289 0.000018034 0.000159640 0.000070403 -0.000194220 -0.003282709 -0.005133745 0.002873007 -0.001424895 -0.000437848 -0.010744392 0.000202285 0.008393310 0.003097408 -0.000314122 0.002141034 0.004660105 0.002510503 0.000816259 -0.000237218 -0.000053601 0.000018938 0.000643103 -0.000294401 0.000033611 -0.000723560 0.000253518 0.000222225 0.000374428 0.000230977 0.001762094 -0.000563406 -0.001631704 -0.000752134 -0.000014110 0.000128961 0.000014100 0.000024848 -0.000043864 0.000031763 0.000178008 0.000052987 -0.000160907 -0.000063022 0.000011995 -0.000085853 -0.000084210 -0.000052290 0.000026977 -0.000031565 0.000193418 0.000013867 0.000001111 -0.000085819 -0.000017285 0.000112281 0.000161468 -0.000011378 -0.000032943 0.000014197 -0.000319932 -0.000271152 0.000069233 0.000106481 0.000027179 -0.000573582 0.002037416 0.000512405 0.000861210 -0.001960095 0.003025368 0.016023782 0.010814553 0.002026362 -0.001572789 0.002676348 0.016430319 0.005688860 0.001653041 -0.000450229 -0.000121208 -0.003598128 -0.001277804 -0.001305973 0.001383982 -0.002646493 -0.016408982 -0.012784386 -0.001609068 0.003040922 -0.005409979 -0.030330262 -0.013849619 -0.003056554 0.000359717 0.003691223 0.003842107 -0.002070996 -0.002218679 0.000182769 0.002729414 -0.001947715 -0.000308126 -0.000332521 0.000082609 0.000694550 0.001537870 0.000334320 -0.000286612 -0.000485612 -0.001428101 0.006989705 0.003990648 0.002071259 0.000183590 -0.000121705 -0.001841715 -0.001291530 -0.000357608 0.000188897 0.001326923 -0.002191000 -0.001480689 -0.001152018 0.000297748 -0.000240203 -0.004386253 -0.002309175 -0.000839508 -0.000071735 -0.001860598 -0.000046736 0.000601644 0.001339009 -0.000727831 -0.001603460 0.008755157 0.005437211 0.002870250 -0.000048222 0.000438612 0.002369737 0.000623106 0.000285630 0.000468722 0.002570310 -0.006380857 -0.003786536 -0.003119251 0.000542254 0.001348038 -0.005150890 -0.003770971 -0.002134332 -0.000331730 -0.004134690 -0.001803988 0.001868608 0.002828989 -0.000489720 -0.003428813 0.007176503 0.004124748 0.004582326 -0.000485205 -0.000863721 0.001928109 0.002896645 0.002266675 0.000058534 0.000904322 0.000393322 -0.000300038 -0.000576398 0.000084454 0.000394903 -0.001578197 -0.000732745 -0.000624287 0.000095002 0.000300457 -0.000171973 -0.000522033 -0.000402261 0.000448742 0.002606504 -0.000849981 -0.002777976 -0.004650245 0.000165218 0.000646833 -0.001770311 -0.000997942 -0.001095933 0.000158058 -0.000025275 -0.000115121 -0.000537046 -0.000623889 0.000116020 0.001120337 0.000053250 -0.000703966 -0.001068743 0.000104939 0.000858373 -0.001012541 -0.000811132 -0.001067250 0.000082404 0.000080182 -0.000346787 -0.000503679 -0.000374246 -0.000140822 0.000686179 0.002193231 0.001106058 0.000087923 -0.000243935 0.001232669 0.002985924 0.001654920 -0.000177293 0.000216991 -0.000472839 -0.002115642 -0.001420508 -0.000239925 0.000041216 -0.000387530 -0.001131691 -0.000397379 -0.000008890 0.000014935 -0.000308114 -0.000417810 -0.000133962 0.000100871 -0.000124677 0.000378633 0.001277515 0.000809855 0.000042868 -0.000007419 -0.000291880 -0.000178507 0.000021183 0.000147843 -0.000003264 0.000138296 0.000598628 0.000092534 -0.000016520 -0.000001622 -0.000289863 0.000055602 0.000043001 0.000166190 0.000001230 0.000025312 0.000448495 0.000051224 0.000025687 0.000014306 0.000031987 0.000146105 -0.000061852 -0.000049573 -0.000014199 -0.000076617 0.000056106 0.000083879 0.000091056 0.000028639 0.000167370 -0.000327691 -0.000217133 -0.000195760 -0.000013831 0.000004761 -0.000012660 0.000084175 0.000041463 0.000030262 0.000209279 -0.000121475 -0.000204418 -0.000223582 -0.000638403 -0.005190924 0.001379180 0.004705638 0.001916277 -0.000085305 0.000011772 0.000766412 0.000403110 -0.000506311 -0.000032536 0.001592096 -0.000257191 -0.000672861 -0.000162255 -0.000065606 -0.000149119 0.000015582 0.000314918 0.000085257 -0.000018939 0.000002221 0.000170275 0.000051937 -0.000046778 0.000062622 0.000158207 0.000100426 -0.000329522 0.000017452 0.000042321 0.000391150 0.000035208 -0.000349650 -0.000694484 0.000002698 -0.000030730 -0.000083790 -0.000029526 -0.000022513 -0.000052751 -0.000314443 -0.000378931 0.000270586 0.000440273 -0.000022284 -0.000145110 0.000232447 0.000157124 0.000188400 -0.000005808 -0.000076209 0.000005924 0.000035429 0.000062435 0.000007883 0.000095267 -0.000213784 -0.000093669 -0.000127302 0.000038601 0.000291389 -0.000218635 -0.000269637 -0.000337747 0.000016496 0.000150545 0.000000805 -0.000094265 -0.000146495 -0.000031359 -0.000222328 0.000143159 0.000226167 0.000296210 -0.000024749 -0.000138276 -0.000070808 0.000119170 0.000113192 -0.000016577 -0.000037457 0.000079957 0.000087477 0.000055753 0.000019584 0.000063877 0.000145974 -0.000076353 -0.000042941 -0.000007294 0.000024048 0.000277961 0.000093289 0.000052168 -0.000008380 -0.000080096 -0.000011136 0.000039187 0.000054838 0.000021416 -0.000056292 -0.000116940 -0.000119766 0.000016998 -0.000030101 -0.000024159 -0.000016491 0.000140856 0.000001990 0.000000634 -0.000057663 0.000095821 0.000025910 0.000059751 0.000022988 -0.000025243 -0.000195244 -0.000145104 -0.000030108 -0.000012842 0.000008968 0.000055926 0.000065325 0.000014539 -0.000002950 0.000100793 0.000092310 0.000026205 -0.000043353 0.000008950 0.000011782 -0.000097638 -0.000066799 -0.000030636 -0.000752553 0.001195989 0.003263599 0.000611194 -0.000322210 0.002190583 0.004404537 0.000486749 0.000983712 -0.000997714 -0.002593376 -0.002558509 -0.000508774 0.000472174 0.000465297 -0.000567513 -0.000455432 -0.000844468 -0.000360197 0.000157496 -0.001221992 -0.000755562 -0.000936285 0.000175855 0.000296881 0.000138790 0.000596462 -0.000574043 0.000075313 -0.000172749 0.000577345 -0.000149136 -0.000230195 -0.000471459 -0.000059370 0.000635182 -0.000454242 -0.000586158 -0.001001627 -0.000024153 -0.000145304 -0.000400473 0.000173401 0.000018272 0.000240782 0.000049466 -0.001311152 0.000099296 -0.000052765 0.000416904 -0.000092056 -0.002724812 -0.000174992 -0.000368463 0.000743163 0.000441271 0.000040139 0.000052262 -0.000240807 -0.000100360 -0.000562998 0.001026781 -0.000597813 0.000687971 -0.000262220 0.000384914 0.001337734 -0.000577258 0.000222375 -0.000378854 0.000719528 -0.000182799 0.000023804 -0.000251894 0.000014471 -0.001100385 -0.001273692 -0.000692930 -0.000427289 0.000246019 0.000272492 -0.000444044 -0.000000360 0.000975043 0.000145055 -0.003043014 0.002612087 0.001468820 0.001439572 -0.000553129 -0.000128151 0.000367072 0.000574673 0.000424611 -0.000044791 0.000226367 0.000189688 -0.000057706 -0.000248354 -0.000087027 0.000161378 0.000101910 0.000042789 -0.000231291 -0.000056673 -0.000032971 0.000181429 0.000121063 0.000101076 -0.000059534 -0.000020886 -0.000212164 -0.000142392 -0.000119474 0.000050915 -0.000005312 0.000138431 0.000079302 0.000105724 -0.000028312 -0.000208424 0.003260669 -0.000288383 0.000430070 -0.001122157 -0.000283578 0.003888551 -0.001041362 0.000815253 -0.001313249 -0.000113234 -0.001120571 0.001237245 0.000921627 0.000499068 -0.000125530 0.000293107 0.000178574 -0.000040108 -0.000108793 -0.000134139 -0.000178653 -0.000053017 0.000206137 0.000034205 0.000018176 0.000181894 0.000141838 -0.000097576 -0.000054782 0.000131640 -0.000046895 0.000473230 -0.000908389 0.000063730 0.001704445 0.000435100 -0.000009217 0.000276036 -0.000131386 0.001362757 -0.001804819 0.000076295 -0.001265351 0.000397313 -0.000139452 -0.001055224 -0.000572841 0.000240240 0.000307159 -0.000054048 0.000060147 0.000201184 -0.000018699 0.000082678 -0.000081265 0.000607266 -0.000723606 0.000122636 -0.000560514 -0.000137612 -0.000819026 0.000035744 0.001193299 0.000469207 -0.000004714 -0.000109431 0.000117571 0.000146853 0.000005959 0.000118641 0.000176917 0.000476320 -0.000560181 -0.000243849 -0.000206615 -0.001100290 -0.002857839 0.000673655 0.000885432 -0.000028544 -0.000007631 -0.000338260 -0.000058515 0.000018400 0.000052190 0.000331426 0.000600389 -0.000302880 0.000003540 0.000106914 -0.000317050 0.001823927 -0.000443075 0.000133903 0.000089911 -0.000573743 0.000503903 -0.000532674 0.000100810 0.000029191 -0.000133641 -0.000481770 0.000074352 0.000277130 -0.000000025 -0.000890588 -0.001052313 -0.000310096 0.000176470 -0.000093835 -0.000767239 -0.000964945 0.001024834 0.000594050 -0.000483297 -0.001957901 -0.001195092 0.001917140 0.000790384 0.000000748 0.000227364 0.000197411 -0.000021352 -0.000143815 0.000111016 0.000489764 -0.000073424 -0.000569069 -0.000183562 0.000006613 -0.000205107 -0.000137659 -0.000173056 0.000109782 -0.000039508 -0.000172671 -0.000051533 0.000157057 0.000090769 0.000032437 0.000208593 0.000096011 -0.000166820 -0.000171378 -0.000009508 0.000002030 0.000010514 0.000014770 -0.000020328 0.000290973 -0.000591412 0.005609965 -0.000799010 -0.000111208 0.000065089 0.000221165 0.001521122 -0.000145197 -0.000228343 -0.000198210 -0.000750531 0.000214472 0.001060573 0.000842115 0.000021959 -0.000194584 -0.000091890 -0.000204031 0.000035998 0.000005895 0.000265920 0.000157024 0.000089272 -0.000071580 -0.000010096 -0.000255943 -0.000062862 -0.000011593 0.000102617 0.000045109 0.000410970 0.000579030 -0.000241626 -0.000174910 -0.000065948 0.000470783 -0.000264806 0.000741769 -0.000018811 0.000278317 0.000236274 0.001453595 -0.001300374 -0.000237357 0.000049182 -0.001440283 0.000116061 0.000050803 0.000525808 0.000170596 -0.001119828 0.000566708 -0.000254722 0.000396597 0.000178149 0.001152659 -0.000874445 -0.000689201 -0.000492652 0.000274385 -0.001911326 -0.000110405 -0.000521926 0.000633529 0.000362430 -0.001809742 0.000396379 -0.000708663 0.000577943 0.000175687 -0.000575274 -0.000479742 -0.000696777 0.000116119 -0.000074620 0.000398034 -0.002142363 0.000142647 -0.000094380 -0.000015707 -0.000103468 -0.001008243 -0.000077123 0.000031319 0.000079222 0.000398675 -0.000943152 -0.000536653 -0.000358907 -0.000179968 0.000156303 -0.002376752 0.000653759 0.000181473 -0.000066239 -0.000375652 -0.000784489 0.000278802 0.000330067 0.000199212 0.000487086 0.001009155 -0.000911847 -0.000601209 0.000582318 0.001541129 -0.000317709 0.000982425 -0.000322383 -0.000275417 -0.000241978 -0.000660033 0.000201624 0.000115875 -0.000923015 -0.001099274 0.000528793 -0.000560240 0.000134082 0.002471300 -0.001690163 -0.000023042 -0.000949920 0.000798285 0.003761050 0.002612213 -0.002069307 0.003045322 -0.000425519 0.007136107 0.002640382 0.001867420 -0.000928966 -0.000182545 -0.000582719 -0.001062991 0.000717284 -0.000712673 0.000190864 0.000035526 0.000679829 -0.000318141 0.000335524 -0.000205801 -0.000231545 0.000408652 -0.000492971 0.000318750 -0.000102156 0.000664392 0.001014664 -0.000169944 0.000569349 -0.000248025 -0.000018084 0.000289715 -0.000721756 0.000404722 -0.000037504 -0.000318475 -0.000834507 0.000297129 -0.000574230 0.000201740 0.000099375 0.000180120 0.000167974 0.000041785 -0.000049537 -0.000067835 -0.000237902 -0.000060352 -0.000062357 0.000074191 -0.000037826 -0.000014676 -0.000011601 0.000025933 0.000008089 0.000037659 0.000179901 0.000089793 0.000034680 -0.000058176 0.000006066 0.000044254 -0.000057648 0.000050527 -0.000006974 -0.000002084 -0.000136890 0.000006425 -0.000009165 0.000045145 0.000764446 0.001489819 -0.000007285 0.000739243 -0.000367640 -0.000353373 -0.000799777 0.000939728 -0.000745804 0.000204505 -0.000462915 -0.000890252 -0.000407766 -0.000482374 0.000211205 -0.000372426 0.000165660 -0.000666913 0.000374928 -0.000053990 -0.000319913 -0.000059623 0.000165734 -0.000142078 0.000012696 -0.000299965 -0.000114800 0.000265961 -0.000194724 -0.000006247 0.000051291 -0.000046893 -0.000267900 0.000143525 0.000050765 0.000030813 0.000121875 -0.000413639 0.000246073 0.000001100 0.000099795 -0.000090212 0.000470231 -0.000141706 -0.000002558 0.000078231 0.000232078 -0.000033894 0.000146507 -0.000064942 0.000042530 0.000191714 0.000003731 0.000072850 -0.000057468 -0.000065242 -0.000171962 0.000051449 -0.000055981 0.000048724 0.001019185 -0.001800342 0.001714820 -0.002519252 0.000691120 0.000621016 0.000138601 -0.003022124 0.002120469 0.000657954 0.000096589 -0.002525667 -0.001780288 -0.000081468 0.000357523 0.000583724 -0.000431204 0.000820202 -0.000716623 0.000133337 0.000047774 0.000300320 0.001506213 -0.000930790 -0.000320563 0.000151614 -0.000006427 0.000909864 -0.000430078 -0.000008767 -0.000033869 0.000773021 -0.000255277 0.000225992 -0.000235170 0.000017778 0.000123426 0.001792939 -0.001131685 -0.000205628 0.000004053 0.000357898 0.000529390 -0.000476725 -0.000155930 -0.000097150 -0.000159378 0.000108119 -0.000046654 0.000072823 0.000226293 -0.000535634 0.000405339 -0.000389619 0.000126505 0.000120496 -0.000105836 0.000137522 -0.000166430 0.000077285 -0.000061489 -0.000488829 0.000288131 -0.000280491 0.000132016 0.000019541 -0.000119878 -0.000048043 -0.000027928 0.000045924 -0.000198642 -0.000257508 0.000188438 -0.000050911 0.000055452 0.000042490 0.000065233 0.000291266 -0.000152871 -0.000045106 0.000028865 0.000001606 0.000145301 -0.000113593 -0.000012504 -0.000008951 -0.000000390 0.000113877 -0.000025820 -0.000007885 -0.000118016 0.000070589 0.000092168 0.000067886 -0.000064488 -0.000174361 0.000373706 -0.001495487 0.000869986 0.000006153 -0.000005287 0.000245561 -0.000441676 0.000236887 0.000001862 0.000238509 -0.000432157 0.001042104 -0.000731479 0.000057883 0.000032137 0.000310636 0.000768598 -0.000451130 -0.000212751 0.000078111 0.000003928 0.000598716 -0.000421769 -0.000076950 -0.000013191 -0.000027946 -0.000143472 0.000052430 0.000018905 0.000038670 0.000227331 0.000181126 -0.000093001 -0.000097392 -0.000011424 0.000012633 0.000024492 0.000017761 -0.000010295 0.000014291 0.000018827 0.000138789 -0.000069260 -0.000015304 0.000031590 0.000138089 0.000119328 -0.000029026 -0.000048773 -0.000006242 0.000026337 0.000098346 -0.000000155 -0.000019642 0.000081537 0.000263874 -0.000598507 -0.000528048 -0.000249719 -0.000054616 0.000444052 0.000098659 0.000256109 -0.000148831 0.000013419 -0.000538330 -0.000335257 -0.000125099 0.000208481 -0.000004060 0.000081598 -0.000043248 0.000000828 -0.000044398 -0.000006926 0.000259345 0.000071968 0.000030440 -0.000110336 -0.000004928 0.000106008 0.000016077 0.000013969 -0.000048777 0.000011879 0.000011645 0.000140072 -0.000031826 -0.000002633 0.000020823 -0.000060407 -0.000082840 -0.000123321 0.000005617 0.000028859 0.000082788 0.000064329 -0.000128024 -0.000045016 -0.000004607 0.000008452 -0.000139132 -0.000005834 -0.000015823 0.000013018 -0.000141771 0.000050073 -0.000039278 0.000065471 0.000012692 0.000006085 -0.000092991 -0.000080328 -0.000018420 0.000096037 0.000520877 -0.000284136 -0.000562084 -0.000354123 -0.000087165 -0.000381033 0.000120352 0.000736039 0.000321331 -0.000178616 -0.001315426 0.001168707 0.000929201 0.000921164 -0.000055762 0.000345630 0.001033225 0.000273100 -0.000059018 -0.000032876 0.000464772 0.000347252 0.000092758 -0.000195771 0.000026112 0.000387459 0.000382101 -0.000139969 -0.000160083 -0.000008334 -0.002307534 -0.001096996 0.000100858 0.000821180 -0.000092711 -0.000505275 0.000938715 0.000588934 0.000637724 -0.000104377 0.000723810 0.000607916 0.000909887 -0.000052404 0.000081416 0.000014778 -0.001015967 -0.000551008 -0.000222000 0.000127191 -0.000604359 -0.001132699 -0.001025555 -0.000116560 0.000160678 -0.000808683 -0.001890310 -0.001052415 0.000000364 0.090924885 0.090539582 0.286828897 0.016562280 0.017311618 0.063555606 -0.006479567 -0.016710412 0.027556280 0.411837844 -0.025446971 -0.007568544 0.012742205 0.241887229 0.252538951 0.001070547 0.002003547 -0.005246573 0.006851435 0.002754729 0.003617769 0.004191562 0.001888433 0.013568444 0.006179019 0.000511714 -0.000435231 0.000558146 0.002597924 -0.004933074 0.000008004 0.000010562 -0.000025060 -0.000002213 -0.000008093 -0.000051261 -0.000033297 -0.000055335 -0.000163551 -0.000312284 -0.000048629 -0.000016414 -0.000050584 -0.000156227 -0.000158919 0.000029580 0.000006953 0.000021007 0.000114915 0.000360851 -0.000012297 0.000256455 -0.000206812 0.000075030 0.001638085 -0.000040003 -0.000023652 -0.000123501 -0.000240609 -0.000465692 -0.000335608 -0.000059942 -0.001187300 -0.002842044 0.000953809 -0.000124240 -0.000456698 -0.000494718 -0.001096102 -0.001817730 0.000710032 0.000163632 0.001729573 0.004729310 -0.000063584 0.000062100 0.000027980 0.000190608 0.000399237 0.000747292 -0.000421162 -0.000606372 -0.000384521 -0.001552546 -0.005337724 -0.000121129 -0.000323597 0.000002568 -0.000546732 -0.001999239 0.000044404 -0.000021467 0.000167563 0.000218391 -0.000170384 -0.000135861 -0.000251201 -0.000187987 -0.000701532 -0.001380211 -0.000101760 0.000116604 -0.000150203 -0.000025931 0.000677908 0.000004397 -0.000061887 0.000236123 0.000221912 -0.000006715 0.000092803 0.000012493 -0.000018241 -0.000090280 0.000026887 -0.000042005 -0.000010808 -0.000472735 -0.001029405 0.000439736 -0.000075858 -0.000069199 0.000067583 0.000368869 -0.001494235 0.002193072 0.003163987 0.000994002 0.008415638 0.021006792 -0.000168758 0.000183238 -0.000878675 -0.000343349 -0.002957767 -0.000013057 -0.000009634 -0.000073880 -0.000073377 -0.000246658 0.000023648 0.000033792 0.000017199 0.000060355 0.000230714 0.000002882 0.000067807 -0.000051239 0.000002761 0.000369127 0.000003868 0.000013127 -0.000018075 0.000024570 -0.000028556 -0.000043373 -0.000023219 -0.000063961 -0.000171986 -0.000130605 -0.000015000 0.000001906 -0.000070460 -0.000117394 0.000035694 -0.000021746 0.000001193 -0.000187792 -0.000152994 -0.000106292 0.000020561 -0.000065250 0.000039311 0.000058931 -0.000342675 0.000010018 -0.000006217 -0.000049441 0.000011720 -0.000053363 -0.001372850 -0.002086744 0.000376777 -0.018117211 -0.005398940 -0.001817908 -0.002231647 -0.008951597 -0.028414838 -0.006183885 -0.000171166 0.001150404 -0.000281311 0.002363971 0.006243139 0.002271209 0.002059644 0.000956603 0.012928038 0.004276738 -0.000093604 -0.000056886 -0.000015464 -0.003310885 -0.000311198 0.000287075 -0.001981581 -0.001262098 -0.007509855 -0.003321667 -0.000258485 -0.000211721 -0.000539674 -0.002297841 -0.000512595 -0.000020283 -0.000012506 -0.000169199 -0.000440253 0.000066228 -0.000155253 0.000126242 0.000093934 0.000462678 0.000042105 -0.000458753 -0.000054886 0.000048807 -0.000591462 -0.000254103 -0.000510087 0.000142280 -0.000199289 0.000709471 0.000117171 0.001936470 -0.000796829 0.000146009 -0.000434640 -0.000549409 0.000035697 0.000025312 0.000129590 0.000032297 -0.000155250 0.000363274 0.000007302 0.000100712 -0.000134627 -0.000195833 0.000096439 0.000823441 0.000240534 0.000526530 0.000276209 -0.000135976 0.000270648 0.000086371 0.000370092 0.000204321 -0.000590771 0.000700222 -0.000070325 0.000670026 0.000614491 -0.000230308 -0.000120881 0.000019873 -0.000197880 -0.000031256 -0.000848489 0.000340147 -0.000177521 -0.000677783 0.000803942 -0.002795360 0.002494609 0.001340329 0.001846888 -0.001199310 -0.002404577 0.001647682 0.000338750 0.001438384 0.000718033 -0.000234652 -0.000142474 -0.000134229 -0.000253075 0.000192647 -0.000967916 -0.000942423 -0.000777932 -0.000855986 0.000435821 -0.000050078 -0.000903284 0.000415700 -0.000404285 -0.000469422 -0.000138480 0.000133240 -0.000064053 0.000116754 0.000178491 -0.000355741 0.000508226 -0.000146746 0.000275876 0.000425614 0.000009893 0.000128163 0.000102381 0.000320789 0.000108320 -0.000081978 0.000057737 -0.000132270 -0.000059702 -0.000001034 -0.000227701 0.000166143 -0.000064414 0.000113415 0.000191077 0.000130189 -0.000063874 0.000008682 -0.000110050 -0.000122339 0.000659859 -0.000131960 0.000208469 -0.000292280 -0.001248010 -0.000515912 -0.001944457 0.000300511 -0.003416222 -0.001290561 0.000922836 -0.002562093 -0.001006522 -0.000434678 -0.000510740 0.000123723 -0.000394895 -0.000088240 -0.000120171 -0.000075105 -0.000053049 -0.000400917 0.000145324 -0.000108825 -0.000085628 -0.000031258 0.001549016 -0.000144684 0.000631251 0.000480738 0.000003945 0.000018261 -0.000063740 -0.000034280 -0.000004029 -0.000066148 0.000123004 -0.000037622 0.000015322 0.000060170 0.000038151 0.000022250 0.000054355 0.000085193 0.000030607 -0.000043017 0.000018029 -0.000066387 -0.000014297 0.000007563 -0.000137028 -0.000030737 -0.000062702 -0.000055908 0.000058489 0.000207906 -0.000041270 0.000127092 0.000121639 -0.000063098 -0.000678008 -0.000556524 0.004467176 -0.003686868 -0.005762469 -0.002826525 -0.003464580 -0.002450903 -0.009470521 -0.033802943 -0.003216918 -0.002668184 -0.003499216 -0.022075956 -0.033402728 0.001641659 0.001261437 -0.006842446 0.002230130 0.002581032 0.002246022 0.002545010 0.001128590 -0.000110437 0.015196607 0.005856152 0.005202855 0.000600485 0.014465910 0.008305525 0.000450774 0.000522300 -0.000878403 -0.001023340 -0.000150659 0.000039083 0.000130400 -0.000457314 0.000404621 0.000109205 0.000116007 -0.000514509 -0.000146548 -0.000307758 -0.000260753 -0.001721657 -0.001375418 -0.000922925 -0.007449169 -0.003171292 0.000396009 0.000495810 0.000603977 0.001521566 0.000887646 0.000461304 0.000286332 0.000110738 0.002517793 0.001120642 0.001291875 0.000912189 0.000980823 0.004114259 0.001830942 -0.000036391 -0.000437611 0.000487801 0.000363684 -0.000238798 -0.002292514 -0.002215368 -0.001398483 -0.008503420 -0.004080312 -0.000955619 -0.000240778 -0.000534647 -0.001711168 -0.000678870 0.002057214 0.001694958 0.000491823 0.005771294 0.002828961 0.001352856 0.001712647 0.000806746 0.004882686 0.002774760 0.000923550 -0.001089405 0.001272384 0.000762144 -0.000349663 -0.002794869 -0.002125249 -0.000421660 -0.005665044 -0.002774957 -0.000604505 -0.001771701 -0.000516158 -0.001695676 -0.001574753 -0.000123837 0.000253449 -0.000297650 -0.000203889 0.000021443 0.000610222 0.000375093 0.000214999 0.001107477 0.000591358 0.000042351 0.000314099 0.000019365 0.000195088 0.000258904 0.000347616 0.002820250 -0.000407089 0.000818586 0.000950765 0.001922510 0.000734485 0.000145594 0.001316967 0.000687791 -0.000085628 0.000845459 0.000063174 0.000326377 0.000438804 0.000011735 0.000487016 -0.000247716 0.000053334 0.000228667 0.000415656 0.000457170 -0.000029392 0.000840407 0.000458813 0.000106960 0.000277986 0.000103769 0.000326275 0.000263540 -0.000600543 -0.000393694 -0.000699370 -0.001919493 -0.000948362 -0.000658489 -0.000524976 -0.001139283 -0.002921545 -0.001425386 0.000514812 0.000581644 0.000724561 0.001812075 0.001140162 0.000362816 0.000110058 0.000346358 0.000939547 0.000393787 0.000118761 0.000014973 0.000171702 0.000394046 0.000144648 -0.000291899 -0.000306833 -0.000422295 -0.001221584 -0.000685369 0.000063943 0.000007111 0.000123679 0.000061345 0.000031267 -0.000235951 -0.000020684 -0.000159959 -0.000322467 -0.000173975 -0.000039162 0.000009751 0.000089373 -0.000062584 -0.000019111 -0.000187562 -0.000015688 -0.000081333 -0.000239948 -0.000118132 -0.000069820 0.000037720 -0.000020776 -0.000047310 -0.000011236 -0.000021051 -0.000048384 0.000011499 -0.000085759 -0.000037872 0.000119543 0.000102607 0.000025945 0.000265669 0.000150479 0.000018879 -0.000053029 -0.000015938 -0.000026887 -0.000024704 0.000044140 0.000139190 -0.000021126 0.000127115 0.000089458 -0.000954705 -0.001889253 0.000635514 -0.001455318 -0.001478565 -0.001535516 -0.000015005 -0.000188131 -0.000554054 -0.000353395 0.000482699 -0.000806778 -0.000188145 0.000017197 -0.000132296 0.000120559 -0.000677633 0.000028942 -0.000074658 -0.000142798 -0.000197934 -0.000155987 -0.000001313 -0.000140250 -0.000018543 -0.000172458 0.000553096 -0.000017360 0.000006251 0.000145382 -0.000444642 0.000212031 -0.000061222 0.000036534 0.000077147 -0.000015333 -0.000013411 0.000026450 0.000069876 0.000017275 0.000305519 -0.000169536 0.000113332 0.000163001 0.000011365 -0.000095423 -0.000086800 -0.000004791 -0.000179225 -0.000096772 -0.000003528 -0.000022981 0.000016460 -0.000010405 -0.000015134 0.000081007 0.000044353 0.000010754 0.000161478 0.000074086 0.000089797 0.000159644 -0.000023871 0.000194489 0.000135890 0.000003809 0.000064998 -0.000032658 0.000009241 0.000031448 -0.000058310 -0.000134227 0.000015755 -0.000136862 -0.000104934 0.000039814 -0.000080974 0.000029644 0.000026716 -0.000041926 -0.000030737 -0.000051903 -0.000009322 -0.000069843 -0.000047089 -0.000073569 0.000055091 -0.000020807 -0.000083743 0.000015577 -0.000100819 -0.000033165 -0.000053515 -0.000219742 -0.000084807 0.000005377 -0.000025774 0.000022004 -0.000002247 -0.000016044 0.000003622 0.000045125 0.000056184 0.000144738 0.000096401 0.000059952 -0.000067687 -0.000026173 -0.000049129 -0.000097522 -0.000043174 -0.000015739 0.000006074 -0.000068344 -0.000016776 0.000039510 0.000058626 0.000061709 0.000190579 0.000114171 -0.000009385 -0.000028281 -0.000026785 -0.000056790 -0.000045937 -0.000023199 -0.000000715 -0.000051731 -0.000078685 -0.000033172 0.000025034 0.000030702 0.000023355 0.000084133 0.000048220 -0.000597335 0.000093029 -0.001175580 -0.000464313 -0.000798185 -0.000265638 0.000255743 -0.000173497 -0.002429525 -0.000063887 0.000220467 -0.000356202 -0.000251505 0.001212573 -0.000736155 0.000139649 0.000078684 -0.000401911 0.001019188 0.000120592 0.000169850 -0.000103492 0.000529045 0.000185554 0.000028211 0.000064451 0.000133404 -0.000576223 0.000658572 -0.000461989 0.000043746 0.000101945 -0.000503288 0.000422498 0.000174419 0.000101591 0.000224069 -0.000717543 0.000847806 0.000083095 0.000005464 -0.000064778 0.000585180 -0.000212391 0.000082911 0.000048716 -0.000167291 0.000848808 0.000063828 0.000378851 0.000213041 -0.000307781 0.000978728 0.000594462 0.000521673 0.000015400 0.000031990 -0.000537094 0.000089631 -0.000019320 0.000082184 0.000001486 -0.000264182 -0.000077878 -0.000598366 -0.000044598 0.000193555 -0.000395373 -0.000134984 -0.000584936 0.000005513 0.000051783 0.000032024 -0.000031043 0.000215552 0.000241536 -0.000096708 -0.000330820 0.000927501 0.000034232 0.000000942 -0.000396241 0.000252573 -0.000071131 0.000162945 -0.000244304 -0.000092398 0.000207612 -0.001322029 -0.000287566 -0.000124513 -0.000100574 0.000136787 -0.000544772 -0.000454014 0.000009092 0.000098667 -0.000274724 0.000044448 0.000127915 -0.000016251 0.000082303 -0.000146577 0.000030395 0.000104297 -0.000039506 -0.000009552 -0.000104720 -0.000144598 -0.000130566 0.000037938 0.000011203 0.000074840 0.000158281 0.000148250 -0.000016718 -0.000015100 -0.000055840 -0.000088112 -0.000144659 -0.000226618 0.000374416 -0.001632364 -0.000381591 -0.000782844 0.000030611 0.000345390 -0.002059135 -0.000145767 -0.001185808 -0.000064243 -0.000591330 0.000340986 -0.001052356 -0.000750484 -0.000097255 0.000059876 -0.000099070 -0.000072486 0.000017188 0.000040200 -0.000123227 0.000056246 -0.000022980 -0.000053974 -0.000080110 0.000059711 -0.000050899 -0.000047142 0.000040644 -0.000162134 0.000300511 -0.000004137 0.000039877 0.000236401 -0.000038375 -0.000033970 -0.000116231 -0.000155458 -0.000120129 -0.000032796 0.000027727 0.000236343 0.000445630 0.000452294 0.000390345 -0.000232021 0.000243709 0.000406709 0.000084013 -0.000746051 0.000084360 -0.000022462 0.000043353 0.000049618 0.000750639 -0.000320143 -0.000035723 0.000157466 0.000154445 -0.001214676 -0.000251214 0.000106677 -0.000312911 -0.000350730 -0.000354149 -0.000125923 0.000005771 -0.000131551 -0.000082627 -0.000219386 0.000285913 -0.000061459 -0.000227728 0.000077738 0.000900933 -0.000393228 0.000435985 0.001050174 0.000401808 0.000420302 -0.000161868 0.000027251 0.000172112 0.000084032 0.000079969 -0.000026395 -0.000120227 -0.000087920 -0.000097296 -0.000555402 0.000607463 -0.000133286 -0.000607462 -0.000296698 -0.000058155 0.000365526 0.000093362 -0.000116605 0.000049695 0.000104695 -0.000020991 0.000078037 0.000157913 0.000094339 0.000011737 -0.000221506 0.000266909 0.000409964 0.000399960 -0.000548680 -0.000087987 0.000292071 0.000094461 -0.000095964 -0.000527811 -0.000287413 0.000253668 0.000379309 -0.000272462 -0.000043863 0.000049158 -0.000056479 -0.000076770 -0.000031232 0.000416918 0.000443761 -0.000096586 0.000117903 0.000188635 0.000101568 0.000081018 0.000052854 0.000087532 0.000082686 -0.000053542 -0.000114774 0.000033765 -0.000016265 -0.000038004 -0.000009989 0.000128232 -0.000057031 -0.000028804 0.000039290 -0.000009879 -0.000008864 -0.000002576 -0.000009890 -0.000002480 -0.002641826 0.000833588 -0.000340278 -0.002611361 -0.000943217 -0.000664583 0.000181399 -0.000230536 -0.000713465 -0.000291832 -0.000043706 -0.000643163 0.000071752 -0.000192641 -0.000513559 0.000022278 0.000065598 0.000072863 -0.000017010 0.000116188 -0.000057830 -0.000050051 -0.000102374 -0.000058045 -0.000081899 0.000016762 0.000034604 0.000083832 0.000005740 0.000005014 -0.000055021 0.000080510 -0.000137571 -0.000171124 -0.000071590 0.000041627 -0.000192724 -0.000130930 0.000151485 -0.000217614 -0.000084160 0.000358762 -0.000045921 -0.000445386 -0.000009689 0.000149008 -0.000261166 0.000661483 0.000052947 0.000125452 -0.000083843 -0.000101062 0.000595175 -0.000113458 0.000281400 0.000006802 0.000478620 -0.000498317 0.000694214 0.000468452 0.000164992 -0.000115120 0.000937905 0.000504137 0.000612810 -0.000037509 -0.000038827 0.000913878 0.000234203 0.000749736 0.000079288 0.000191095 0.000365113 0.000631052 0.000734617 0.001020660 -0.000183728 0.000100188 0.001034281 0.000434072 0.000444831 -0.000018350 0.000161405 0.000508058 0.000261835 0.000466097 0.000247728 0.000038633 0.000487138 0.000442925 0.001058172 -0.000463966 0.000139741 0.001080542 0.000278676 0.000343534 -0.000213647 0.000169272 0.000373275 0.000072990 -0.000441526 0.000590325 -0.000147981 -0.000379578 0.000148080 0.000053222 -0.000012161 -0.000265088 -0.000297527 -0.000391220 0.000146918 -0.000016561 -0.000071969 0.000401549 0.000172576 -0.000104618 -0.000003392 0.000268919 -0.000006330 0.000185253 0.000062610 -0.000069524 0.000393296 0.001079810 0.000758277 0.000519912 -0.000388008 -0.000283217 0.000366371 -0.000468244 -0.000308545 0.000205270 -0.000159108 -0.000704386 -0.000170098 -0.000158771 0.000029503 0.000310897 -0.000073996 0.000121518 0.000076455 -0.000004427 -0.000197439 -0.000063014 -0.000166800 0.000097193 -0.000000454 -0.000184928 0.000066997 0.000008609 0.000047053 -0.000005315 -0.000171716 -0.000195862 -0.000245039 0.000154504 -0.000032257 -0.000181676 0.000253560 0.000042605 -0.000068819 0.000022710 0.000191287 0.000102037 0.000205431 -0.000033901 0.000010354 -0.000023932 -0.000118060 -0.000072518 0.000009702 -0.000017745 0.000060676 0.000077160 0.000057346 0.000001248 -0.000011715 -0.000002764 0.000011140 -0.000019084 -0.000015521 0.000013267 -0.000051322 -0.000065345 -0.000052926 0.000012108 -0.000007623 -0.000015417 0.000012036 -0.000011427 -0.000005038 -0.000016553 0.000044103 0.000025530 0.000014191 0.000041441 -0.000004370 -0.000222254 -0.000323481 -0.000340606 -0.000254177 0.000060525 0.000251437 -0.000192010 0.000069155 0.000059712 0.000024694 0.000037356 0.000348393 0.000320984 0.000146814 -0.000027963 -0.000151998 0.000210944 0.000010643 -0.000012803 0.000001738 0.000040236 -0.000016708 -0.000009221 -0.000063384 0.000036269 0.000073735 -0.000147085 -0.000018279 0.000047030 -0.000055938 0.000015784 0.000112888 0.000018301 0.000089748 -0.000052441 -0.000042900 0.000134738 -0.000009362 -0.000106821 0.000029390 0.000036498 -0.000146655 -0.000042382 0.000017260 -0.000005434 -0.000049115 -0.000035573 -0.000060391 0.000003163 0.000005974 -0.000050407 -0.000040755 -0.000047731 -0.000018637 -0.000009555 0.000044360 0.000011190 0.000013551 -0.000288042 0.000122490 0.000521577 -0.000124361 0.000389304 0.000430765 -0.000803668 0.000118950 0.001112892 0.000056848 0.000030788 -0.000003023 0.000252358 0.000172004 0.000125688 -0.000110116 0.000058508 0.000126130 -0.000075438 0.000039440 -0.000126213 0.000357284 -0.000089027 -0.000412552 -0.000035668 -0.000161931 0.000106024 0.000024794 -0.000163395 -0.000021111 0.000147489 0.000083743 -0.000193299 0.000047292 -0.000051723 -0.000277989 0.000322585 -0.000002410 -0.000571052 -0.000040410 0.000000596 0.000202722 -0.000065506 -0.000168742 0.000022470 -0.000074833 -0.000007520 0.000049897 -0.000039647 -0.000002715 -0.000136341 0.000005821 0.000105151 -0.000096313 0.000027733 -0.000046377 -0.000023052 0.000038675 -0.000000056 0.000036467 -0.000087667 0.000008213 0.000121773 -0.000003318 0.000073255 0.000011862 -0.000016359 0.000031736 0.000054470 0.000039114 -0.000059845 -0.000014087 0.000068533 -0.000034625 -0.000004218 -0.000057124 0.000056235 -0.000016331 -0.000113880 -0.000019138 -0.000021800 0.000029961 0.000003352 -0.000048846 0.000002600 -0.000027133 0.000001510 0.000001781 -0.000043098 -0.000018019 -0.000049305 0.000074849 -0.000033192 -0.000117338 -0.000035283 0.000322756 -0.000157018 -0.000085383 0.000396173 0.000015238 0.000127259 -0.000015442 -0.000035710 0.000142594 0.000019586 -0.000227341 0.000100345 0.000096417 -0.000260490 0.000013130 -0.000054445 0.000215787 -0.000072997 -0.000263586 -0.000030198 -0.000086899 0.000131200 -0.000006414 -0.000182520 0.000002665 0.000038729 -0.000019847 0.000011676 0.000064384 0.000020310 -0.000002183 0.000062253 -0.000052969 -0.000079466 -0.000021561 -0.000002437 -0.000009196 -0.000003471 -0.000014907 -0.000015415 -0.000033163 0.000023119 -0.000006141 -0.000052501 -0.000008531 -0.000024222 0.000029000 -0.000035628 -0.000067715 -0.000025912 -0.000027038 0.000005749 -0.000008447 -0.000045915 -0.000023759 0.000079728 0.000185556 0.000049630 0.000701262 0.000499040 -0.000006676 -0.000224090 -0.000221142 0.000139202 -0.000200766 0.000108502 0.000096762 0.000342912 0.000231764 -0.000052602 0.000017032 -0.000007378 -0.000038733 0.000075075 0.000011141 -0.000027945 -0.000034983 -0.000125424 0.000037184 -0.000018731 -0.000008075 -0.000038011 -0.000043833 0.000042397 0.000005549 -0.000051714 0.000027105 0.000003590 -0.000115675 -0.000031275 0.000001369 0.000062951 0.000056160 0.000063334 0.000105670 -0.000062429 0.000075322 -0.000011930 -0.000042733 0.000119076 0.000043504 -0.000008549 0.000006897 0.000158407 0.000032828 -0.000024679 0.000025627 0.000086110 -0.000121141 0.000022352 0.000011413 0.000039325 0.000015366 0.000055438 0.000093354 -0.000175623 0.000005513 -0.000533248 0.000301282 0.000484057 0.000248053 -0.000232155 -0.000150908 -0.000115410 -0.000720325 -0.000021738 0.000183750 -0.000659168 -0.001097937 -0.000738708 -0.000264765 -0.000060939 -0.000733918 -0.000555350 -0.000239656 -0.000147574 -0.000100501 -0.000370132 0.000001707 -0.000061454 -0.000273848 -0.000002157 -0.000143720 -0.000095520 0.000091606 0.000653465 0.000390074 0.000770125 -0.000114616 -0.000127388 -0.000431690 0.000063962 -0.000388993 -0.000500100 -0.000124245 -0.000013622 -0.000700913 -0.000781845 0.000010168 -0.000193303 0.000204612 0.000183232 -0.001389725 0.000071640 0.000244678 0.000198985 0.000340274 0.000297765 -0.000210696 0.000455370 0.000350102 0.000333270 0.000647868 0.000483828 -0.000041552 0.110593076 0.125821762 0.275952549 0.015426350 0.087282266 0.098218433 0.000047874 -0.000039006 -0.000039834 0.046949659 -0.000010778 -0.000015396 0.000039812 -0.029863626 0.105856694 0.000069154 0.000020125 -0.000003780 -0.073878050 0.107302380 0.000055010 -0.000010039 -0.000088259 -0.057312563 0.027634470 0.000011097 0.001598889 -0.000710319 0.028001455 -0.105448453 -0.000247025 0.000379364 -0.000277014 0.066764355 -0.099309261 0.007636618 0.004512127 -0.012037653 -0.000321686 -0.000241595 0.013935121 -0.005302421 -0.023597830 -0.000087442 -0.001089143 0.001656791 -0.009000484 -0.004341823 -0.000437064 0.000649153 -0.000336652 0.000317499 0.000231166 0.003847980 0.008184786 -0.000369127 -0.001873731 0.000255067 -0.001179694 -0.006562030 0.000159147 -0.001401907 0.001209770 0.000619063 -0.029008765 -0.000416752 -0.000442022 0.000659701 0.002424930 -0.004829927 0.000993276 -0.000773893 -0.000327101 0.003724635 0.011996612 -0.000000756 0.000769429 0.000154978 0.005090067 0.017134749 -0.000587080 -0.000689732 0.000214253 0.005952921 -0.000723964 0.000676382 0.001211399 0.000309479 -0.001024980 -0.001533085 0.003834289 -0.000125651 -0.003591512 0.002176632 0.003186025 0.000562079 -0.001515364 0.000803735 0.007304689 -0.000335102 0.001654152 0.006911851 -0.004535981 -0.000087936 -0.004431594 -0.000196415 0.002569209 -0.001483067 0.002215813 0.001169612 0.000037923 -0.000031105 -0.000032188 -0.004205027 -0.000082973 0.000022004 0.000037091 0.000056945 0.000081280 0.001083569 0.000149643 0.000203287 0.000036444 -0.001289754 0.000499951 -0.000133600 -0.000017571 0.000177147 -0.003613805 0.000121935 0.000167529 0.000087124 -0.000066448 -0.000167070 0.000745565 0.000264565 0.000068197 -0.000183839 -0.001261989 -0.000708877 0.000407794 0.000019397 -0.000158884 0.000073783 -0.000243959 -0.000182107 -0.000198409 0.000001382 0.000201391 0.000432522 -0.000015172 0.000026316 0.000077568 0.000179482 0.000758355 -0.097475725 -0.123803162 -0.015871439 -0.000934132 0.000118964 -0.123399933 -0.275527255 -0.086125974 0.000119316 0.000238675 -0.023923031 -0.087365844 -0.092365396 -0.000055527 -0.000185762 -0.018807884 -0.015503719 0.003320445 0.000086327 -0.000165823 -0.022236028 -0.000779057 0.021689248 0.000153659 -0.000062282 -0.001473633 0.007398635 0.013401164 -0.000031344 0.000033278 0.002543914 0.000230440 0.006296791 0.000015682 0.000033173 -0.001034095 0.002225477 0.000187764 -0.000042633 0.000007783 0.003165686 -0.000996306 -0.001194398 0.000005658 -0.000004768 -0.001214476 0.002040614 -0.001091395 -0.000012691 0.000023250 0.001742326 -0.000721752 0.001117421 -0.000018250 0.000008114 -0.000032958 -0.000884924 0.000377890 -0.000001516 -0.000009484 -0.000039323 0.000173578 -0.000045850 -0.000001879 0.000000429 -0.000023500 0.000447856 -0.000376099 -0.000000385 0.000001617 -0.000245269 -0.000278468 0.000122378 -0.000004191 -0.000003161 -0.000106972 -0.000197535 -0.000132822 0.000000237 -0.000006045 -0.000321980 -0.000905355 0.000109787 0.000002341 -0.000010548 -0.000244841 0.000464995 -0.000448668 0.000005779 -0.000001781 -0.000345569 0.000342367 0.000409140 -0.000003439 0.000002518 -0.000810396 0.001505381 0.001501955 0.000002041 -0.000002284 0.000603567 -0.000703580 -0.000387000 -0.000003584 0.000001844 0.000112076 -0.000233488 -0.000319211 0.000000539 -0.000000262 0.000423892 -0.000582825 -0.000325782 0.000000656 0.000005311 -0.000102604 0.000676962 -0.000443577 -0.000000140 0.000001119 0.000037864 -0.000304344 -0.000053527 -0.000001816 -0.000000631 0.000063212 -0.000477358 -0.000026007 -0.000003707 -0.000000091 -0.000102598 -0.000426285 0.000441965 0.000001417 -0.000004252 0.000101458 0.000053735 0.000048005 0.000003167 0.000003788 0.000026758 -0.000139159 -0.000219676 -0.000000276 0.000001105 -0.000023273 0.000168552 0.000079896 -0.000000066 -0.000001043 0.000498988 0.001363629 0.001008551 0.000002550 -0.000002236 0.001278005 0.000385222 -0.001600530 -0.000000263 0.000000934 0.000647490 -0.001706852 -0.000595046 -0.000000655 0.000005035 0.000053562 0.000052653 0.000056939 0.000001805 0.000000091 -0.000030714 0.000002648 -0.000007293 -0.000000496 -0.000000879 -0.000110123 -0.000281959 0.000023542 -0.000000429 0.000000634 0.000032266 0.000001489 0.000011111 0.000001826 0.000000947 -0.000006718 -0.000018568 -0.000023738 -0.000000197 0.000000416 -0.000064086 -0.000083335 0.000008181 0.000000849 -0.000001253 0.000040126 -0.000001632 0.000022512 0.000000767 0.000000503 0.000020917 -0.000056211 -0.000078156 -0.000000125 0.000000393 -0.000058970 0.000008249 0.000060860 0.000000310 -0.000001272 -0.001502410 0.000056179 -0.001175091 -0.000189047 0.000073658 -0.001988506 -0.006755413 0.002980962 0.000254165 -0.001040837 -0.001073537 -0.004745921 0.001402027 -0.000008204 -0.001764044 0.002754707 -0.000182778 0.001737105 -0.000106433 0.000300248 0.000475399 0.002419696 0.003987422 0.000017818 -0.000078747 0.003918929 0.010810655 -0.003725440 -0.000055906 0.000436059 0.000203077 0.000269270 0.000058836 0.000007995 0.000000830 -0.000032141 -0.000144367 0.000000457 0.000000569 0.000002173 0.000061454 0.000075097 0.000030953 0.000002699 -0.000000054 0.003983186 0.007865555 0.003198405 -0.000006596 0.000107695 -0.001830178 -0.000843914 -0.001198306 -0.000014826 -0.000025889 -0.000513793 -0.002275419 -0.000867177 -0.000000147 -0.000026175 -0.002303004 -0.003400575 -0.001871997 -0.000002427 -0.000056077 -0.000991430 -0.000732278 -0.000383155 0.000004668 -0.000020330 0.004091499 0.007377095 0.003520580 0.000006554 0.000112719 0.000834236 0.001049963 0.000500535 0.000002651 0.000023464 -0.002319239 -0.004483158 -0.001942378 -0.000018482 -0.000062264 -0.002312558 -0.003858758 -0.002043554 -0.000019431 -0.000062308 -0.000619723 -0.000425452 -0.000226177 0.000016171 -0.000031725 0.001990630 0.003601305 0.001321261 0.000012991 0.000050096 0.000797474 0.000831963 0.000679842 0.000013973 0.000018356 0.000184685 0.000143715 0.000109146 -0.000004447 0.000009602 -0.000414275 -0.000595896 -0.000274295 -0.000002286 -0.000011282 -0.000079400 -0.000072399 -0.000081885 -0.000005551 0.000000662 -0.000102134 -0.000291759 -0.000080434 -0.000007101 0.000004922 -0.000385779 -0.000578284 -0.000127531 -0.000001920 -0.000008071 -0.000132038 -0.000097271 -0.000094455 -0.000002917 -0.000002235 0.000074093 0.000035202 0.000031735 -0.000003114 0.000005848 -0.000259375 -0.000524021 -0.000174001 -0.000002457 -0.000005664 -0.000157621 -0.000185599 -0.000118469 -0.000002764 -0.000003889 0.000661819 0.001771660 0.000664061 -0.000010511 0.000033559 0.001836870 0.002683343 0.001361217 -0.000011992 0.000055644 -0.000806096 -0.001389708 -0.000699230 -0.000004227 -0.000029774 -0.000427691 -0.000701044 -0.000343813 0.000002256 -0.000013615 -0.000188066 -0.000370884 -0.000164513 0.000001315 -0.000006502 0.000551627 0.001062367 0.000547503 0.000004285 0.000019953 -0.000044259 0.000003456 -0.000023231 0.000001585 -0.000002925 0.000133487 0.000101303 0.000076587 0.000001560 0.000003740 -0.000018070 0.000059923 -0.000014844 0.000001805 -0.000001976 0.000082259 0.000089118 0.000045302 0.000000913 0.000001937 0.000006384 -0.000001946 -0.000004257 0.000000494 -0.000000105 0.000031686 0.000084752 0.000027165 0.000000267 0.000000575 -0.000096953 -0.000161942 -0.000070270 -0.000001771 -0.000002263 0.000023257 0.000030261 0.000021303 -0.000001098 0.000001580 -0.000035637 -0.000085422 -0.000030219 0.000000484 -0.000001112 0.000270258 0.000546351 0.000116376 0.000004613 -0.000002108 0.000152661 0.000115791 0.000002516 -0.000000028 0.000003250 0.000019481 -0.000077877 0.000040993 0.000000224 0.000001388 0.000019799 0.000028452 0.000030805 0.000000493 -0.000000123 0.000022138 0.000058361 -0.000028808 -0.000001057 0.000000822 -0.000014868 0.000008148 -0.000050322 -0.000001417 0.000000389 -0.000019781 -0.000067738 -0.000043062 0.000000013 -0.000000502 -0.000034502 -0.000047494 -0.000015351 0.000000503 -0.000001430 -0.000069807 -0.000066369 -0.000035786 -0.000000209 -0.000002147 0.000057345 0.000105177 0.000035612 0.000000699 0.000001144 0.000001002 0.000006030 0.000003934 0.000000210 -0.000000432 -0.000057423 -0.000104967 -0.000040100 -0.000000220 -0.000001534 -0.000050830 -0.000112799 -0.000039587 -0.000001378 -0.000000778 0.000008364 0.000004970 0.000004315 -0.000000715 0.000000994 0.000040245 0.000076317 0.000028673 0.000001030 0.000000542 -0.000012305 -0.000022269 0.000008724 0.000000824 -0.000000966 0.000023925 0.000040316 0.000016840 0.000000483 0.000000587 0.000023144 0.000056720 -0.000002008 -0.000000851 0.000001255 0.000067550 0.000169041 0.000051918 -0.000000789 0.000002970 -0.000004720 0.000007686 0.000002621 0.000001195 -0.000000515 -0.000069163 -0.000157101 -0.000091574 0.000000089 -0.000002953 0.000060220 0.000055748 0.000091943 0.000000502 0.000001021 0.000011769 0.000041491 0.000005247 -0.000001192 0.000000237 -0.000101429 -0.000154139 -0.000094369 -0.000000973 -0.000002907 0.000040404 0.000048182 0.000032565 0.000001101 0.000001050 0.000051677 0.000065319 0.000039352 -0.000000667 0.000001877 -0.000040430 -0.000063535 -0.000038025 0.000001469 -0.000001274 -0.000501590 0.000007956 -0.000307244 -0.000005591 0.000004522 -0.000351800 0.000828813 -0.000111316 -0.000014141 0.000009371 -0.000274774 -0.000100445 0.000198484 -0.000001426 0.000002831 -0.000076657 0.000063316 -0.000072038 0.000008750 -0.000008650 -0.000031802 -0.000188356 -0.000021480 0.000018931 -0.000001002 0.000395404 -0.000065037 0.000147041 -0.000011328 -0.000000427 0.000001411 0.000010505 -0.000202963 -0.000002288 0.000003757 0.000719471 0.000157577 0.000172330 -0.000019062 -0.000007568 -0.000181196 -0.000570041 0.000020548 -0.000000527 0.000002752 -0.000190719 -0.000522595 0.000085004 -0.000000866 -0.000000071 -0.000199885 -0.000426160 0.000061208 -0.000000307 -0.000000487 -0.000058549 0.000600143 0.000019066 -0.000010376 0.000001636 0.000097735 0.000167562 0.000098311 0.000001821 -0.000001248 0.000238225 0.000274456 0.000021467 0.000009097 -0.000001831 0.000007380 0.000084788 -0.000170622 0.000008472 -0.000003855 0.000004649 0.000128262 0.000015752 -0.000004219 -0.000000925 -0.000211021 -0.000117645 -0.000145536 -0.000001342 0.000001850 -0.000112613 0.000017590 -0.000141273 0.000010023 0.000000154 -0.000103382 0.000035401 0.000114927 -0.000002638 0.000016481 0.000071315 0.000096862 -0.000030872 -0.000010680 -0.000002185 0.000073493 0.000076461 -0.000061224 -0.000006003 -0.000004934 0.000052850 0.000185986 0.000017792 0.000000021 -0.000009049 -0.000006053 -0.000116058 -0.000011580 -0.000000490 0.000000255 0.000013475 0.000051564 -0.000011481 -0.000016317 0.000003200 0.001053635 0.000744095 0.000380271 0.000010679 -0.000017740 0.001354573 0.000702261 0.000604158 0.000007886 -0.000038995 -0.000126928 0.000762987 0.000073279 -0.000050130 -0.000039433 0.000078738 0.000030252 -0.000002256 0.000002140 0.000001239 0.000001761 0.000000858 0.000019296 0.000000506 -0.000001394 0.000033858 0.000005371 -0.000010800 0.000001125 0.000000773 0.000009031 -0.000090134 -0.000006661 0.000000419 0.000002217 0.000023612 0.000042071 -0.000004281 0.000000055 0.000000027 0.000004765 -0.000185286 0.000003051 0.000002273 0.000000631 -0.000098377 -0.000157397 -0.000026371 -0.000004432 -0.000000032 -0.000011422 -0.000017561 -0.000000025 0.000000110 -0.000000221 -0.000000868 -0.000025816 0.000001434 0.000000351 0.000000920 0.000062011 0.000131044 0.000019443 0.000002089 -0.000000654 0.000029055 0.000056049 0.000007996 0.000000990 -0.000000290 0.000060096 0.000108989 0.000014021 0.000002033 -0.000000140 -0.000220982 -0.000344775 -0.000074060 -0.000009547 0.000000692 -0.000034880 -0.000062422 -0.000007375 -0.000001419 0.000000522 0.000013193 -0.000013313 0.000011485 -0.000000287 0.000001141 0.000109644 0.000187905 0.000038385 0.000004538 -0.000001193 -0.000000004 0.000045240 -0.000007370 0.000000606 -0.000002348 -0.000036074 -0.000048782 -0.000013448 -0.000000630 -0.000000510 -0.000075578 -0.000094445 -0.000036390 -0.000004010 -0.000000292 -0.000054627 -0.000034838 -0.000018839 -0.000001629 -0.000001720 -0.000069809 -0.000101869 -0.000017259 -0.000003748 0.000000704 0.000015752 0.000026052 0.000002392 0.000000595 0.000000045 -0.000010726 -0.000035806 -0.000007799 -0.000000533 0.000001028 -0.000021075 -0.000026446 -0.000007880 -0.000000911 -0.000000138 0.000003521 0.000010654 0.000004118 0.000000391 -0.000000323 0.000021761 0.000018609 0.000006353 0.000000024 0.000001221 0.000005542 0.000007733 0.000003504 0.000000290 0.000000012 0.000542306 0.001030854 0.000179919 0.000022310 -0.000003484 0.000200519 0.000282237 0.000088335 0.000006426 0.000002635 0.000009949 -0.000008214 0.000052164 0.000011184 -0.000008900 0.000007647 0.000037640 -0.000002826 0.000000796 -0.000000963 0.000029916 0.000004495 0.000019206 0.000000419 0.000002171 -0.000021131 0.000001364 -0.000012048 0.000000962 -0.000002525 0.000030430 0.000038183 0.000011200 0.000001759 -0.000000069 -0.000016229 -0.000081891 0.000010484 -0.000000771 0.000003726 0.000055721 0.000133903 0.000007796 0.000001783 -0.000002536 -0.000417797 -0.000176939 -0.000096624 -0.000010992 -0.000002031 -0.000421387 -0.000145471 -0.000180405 -0.000009049 0.000009302 0.000271529 -0.000346197 0.000007639 0.000037282 0.000031412 -0.000628219 -0.000628248 -0.000261520 -0.000001862 0.000034519 -0.000618958 -0.000398283 -0.000282693 0.000005027 0.000015359 -0.000263917 -0.000542324 -0.000145355 0.000031250 0.000042437 -0.000207915 -0.000399473 -0.000075380 -0.000011096 0.000003285 -0.000149078 -0.000198814 -0.000074800 -0.000005203 -0.000002213 -0.000088894 -0.000140284 -0.000056316 -0.000009660 0.000005357 -0.000223058 -0.000442600 -0.000063407 -0.000007240 0.000000153 -0.000127321 -0.000171194 -0.000050611 -0.000002169 -0.000003540 0.000103643 0.000192441 0.000005888 -0.000002764 0.000005117 0.000029000 0.000134806 -0.000001121 -0.000002314 0.000000282 -0.000010109 -0.000052613 0.000006926 0.000003918 0.000002644 -0.000054337 -0.000056096 -0.000026236 0.000001396 0.000001433 -0.000046908 -0.000268129 0.000017135 0.000001914 0.000005346 0.000033748 -0.000033582 0.000031277 0.000003581 0.000000969 0.000030928 0.000188567 0.000001426 -0.000002497 -0.000004893 -0.000063215 -0.000059116 -0.000019102 0.000002368 0.000004858 0.000061279 0.000054342 0.000019702 -0.000002606 -0.000003151 0.000025323 0.000033908 0.000002567 0.000002399 0.000000849 0.000025869 0.000073094 0.000003584 0.000000147 -0.000000467 0.000039148 -0.000008835 0.000017739 0.000003247 -0.000000526 -0.000031035 -0.000060298 -0.000009114 0.000002194 0.000004584 0.000001222 0.000032714 -0.000002197 -0.000004415 -0.000002713 -0.000018376 -0.000033629 -0.000003897 0.000001048 0.000001969 0.000005059 -0.000003115 0.000004384 -0.000002563 -0.000003024 0.000020278 0.000027893 0.000006192 -0.000001236 -0.000003501 0.000004663 0.000000383 0.000002143 -0.000001544 -0.000001154 -0.000013795 -0.000018127 -0.000002808 -0.000000878 -0.000000460 0.000047194 0.000110464 0.000007789 -0.000000486 -0.000002341 -0.000048882 -0.000019344 -0.000018670 -0.000000886 0.000001443 -0.000010800 -0.000073397 -0.000001114 0.000001660 0.000002473 0.000034233 -0.000006555 0.000014869 0.000001193 -0.000000515 0.000010506 -0.000011609 0.000006546 -0.000002576 -0.000001816 -0.000024414 0.000015865 -0.000013953 0.000000778 0.000002456 -0.000009988 -0.000034024 0.000000352 -0.000000201 0.000000522 0.000007981 -0.000027939 0.000007560 0.000001139 0.000000304 -0.000000881 0.000027562 -0.000001971 -0.000000925 -0.000001338 0.000011890 0.000016528 0.000004264 0.000000100 -0.000001311 0.000016285 0.000020073 0.000005265 0.000000919 -0.000001586 -0.000010798 -0.000012964 -0.000002503 -0.000001098 -0.000000576 -0.000081953 -0.000059993 -0.000026517 -0.000006022 0.000000451 -0.000092748 -0.000267223 -0.000000304 -0.000000110 0.000003440 -0.000038474 -0.000098292 -0.000007377 -0.000001560 0.000001603 -0.000011096 0.000010062 -0.000003917 -0.000001346 -0.000000493 0.000052866 0.000122168 0.000005380 0.000001095 -0.000001721 0.000006607 0.000048378 -0.000003024 -0.000000384 -0.000001227 0.000036368 0.000019072 0.000011974 0.000002698 0.000000109 0.000039247 0.000141350 -0.000001236 -0.000000636 -0.000002661 0.000030346 0.000052098 0.000003084 0.000001460 0.000000033 -0.000008566 0.000003602 -0.000003834 -0.000000733 -0.000000669 -0.000009177 0.000011760 -0.000004850 -0.000001237 -0.000000532 -0.000008345 -0.000003103 -0.000004258 -0.000000342 0.000000306 -0.000025264 -0.000020832 -0.000008685 -0.000001666 0.000000229 -0.000010989 -0.000021344 -0.000002203 -0.000000141 0.000000613 -0.000013658 -0.000005797 -0.000002906 -0.000001416 -0.000000646 0.000011487 0.000034470 -0.000000227 0.000000129 -0.000000351 0.000001152 0.000011206 -0.000001542 -0.000000356 -0.000000086 0.000002264 0.000011016 0.000000381 -0.000000242 -0.000000581 0.000013253 0.000033772 0.000000540 0.000000587 -0.000000635 -0.000015444 -0.000098337 0.000005699 0.000000965 0.000001927 -0.000005484 -0.000031965 0.000000471 0.000000289 0.000000962 0.000001654 0.000056863 -0.000006589 -0.000001518 -0.000001381 0.000030291 0.000072119 0.000002477 0.000000397 -0.000001053 0.000013228 0.000045989 -0.000001759 -0.000000285 -0.000000378 -0.000008708 -0.000021135 -0.000001205 -0.000000451 0.000000405 0.000017169 0.000028230 0.000003407 0.000000787 -0.000000174 0.000002110 0.000003596 0.000001337 0.000000118 -0.000000366 0.000005574 0.000016197 0.000000097 0.000000207 -0.000000161 0.000013391 0.000026405 0.000001959 0.000000651 -0.000000248 0.000006222 0.000014651 0.000001626 0.000000260 -0.000000568 -0.000302983 -0.000651650 -0.000283800 -0.000009976 -0.000018117 -0.000149717 -0.000283885 -0.000045191 -0.000000561 0.000012699 -0.000320147 -0.000231830 -0.000321563 -0.000007265 0.000003865 -0.000006084 -0.000039016 -0.000050341 -0.000000710 0.000007798 0.000132124 -0.000101799 0.000027094 -0.000002626 0.000003020 -0.000064365 -0.000016351 -0.000085207 0.000009164 -0.000001857 0.000035965 0.000068280 0.000008880 -0.000020441 0.000010187 0.000061428 -0.000038903 -0.000014253 0.000005308 0.000000429 -0.000023219 0.000104667 -0.000013638 0.000004247 -0.000003709 -0.000093462 -0.000148546 -0.000031809 0.000033565 -0.000018564 0.000030071 0.000196392 0.000005422 0.000008493 -0.000010875 0.000085644 -0.000020613 0.000069175 0.000023521 -0.000006540 0.000081759 -0.000097345 -0.000059904 0.000021013 -0.000015957 0.000045303 0.000462852 0.000264898 -0.000005659 0.000011773 0.000099844 0.000081081 0.000325743 -0.000010795 -0.000001706 0.000441590 -0.000228112 0.000249029 -0.000008811 0.000006467 0.000054934 -0.000308207 -0.000091383 0.000004707 0.000000421 -0.000004381 0.000014221 -0.000140454 0.000003503 0.000000128 -0.000060536 0.000518777 0.000085182 0.000000804 0.000002972 0.000252533 -0.000236956 -0.000095851 -0.000004077 0.000000651 0.000045650 -0.000378021 -0.000040650 -0.000002318 -0.000001285 -0.001237208 0.000783007 -0.000908258 0.000003413 -0.000030123 0.000828561 0.000258416 0.000449157 -0.000000600 -0.000007366 -0.001314633 0.000866173 -0.000619778 0.000013343 0.000012661 0.293265176 0.066774238 0.183307954 -0.099478918 -0.007721725 0.718755824 -0.279928832 -0.154209566 0.023351313 0.706333921 -0.000360541 -0.004453496 -0.007091557 0.001280352 0.218265461 0.000762399 -0.008146688 -0.061694953 0.031785004 0.007522499 0.000641481 0.002397803 0.026403057 -0.012363932 -0.156985586 0.000862972 -0.067900366 -0.003652227 0.019842906 0.001568017 0.001484470 0.015710133 -0.377187298 -0.059833620 0.003086802 0.001044937 0.018863285 0.008610111 -0.131046948 0.014862772 0.005283140 -0.080230333 -0.016319876 0.052041179 0.006599621 -0.013340408 -0.036029319 -0.208793719 0.138442878 0.009509373 -0.015072729 0.053331961 0.069293313 -0.262393174 -0.004872095 0.002326761 0.004695906 -0.011812673 0.016575649 -0.068146398 0.004028620 0.003225309 0.065797154 -0.014631005 0.017613236 -0.002088640 0.017187492 0.039175110 -0.055028701 0.018025173 0.001512677 0.004384065 0.026577728 -0.007733073 -0.086794619 0.000414106 0.008514237 -0.014838237 -0.032576417 -0.038842649 0.002258714 -0.007882492 -0.087148394 0.032168571 0.048877020 -0.001349919 0.003493357 0.001010878 -0.000920484 0.004621855 -0.000165616 -0.006934849 -0.011315525 0.024940312 0.000606357 0.000291064 -0.001233562 -0.004827856 0.007155041 0.002194651 -0.001238124 0.002761989 -0.007274611 -0.000689478 0.006047265 0.000056559 0.001848165 -0.012566317 -0.005448106 0.000413434 0.000658955 -0.001799578 0.025156858 0.007360171 0.002848656 0.000327792 0.005958203 0.001098085 0.002977308 0.004308650 -0.000591501 0.001193376 -0.000243726 -0.002750841 -0.006314338 -0.000784568 0.002552145 -0.003258738 -0.003027415 -0.000180591 -0.000087636 -0.001122576 0.001707890 0.001081456 -0.081498153 -0.000043028 -0.000250794 0.000408982 -0.001133247 -0.000505076 -0.000157205 0.000105032 -0.004932883 -0.001936528 0.058011922 -0.000285719 0.000405293 -0.004153466 -0.000736886 -0.013611046 0.000111871 0.000183358 -0.001251016 -0.000277103 0.009659976 0.000058272 -0.000087624 0.002016863 0.000486405 0.030854945 -0.000029372 -0.000044784 0.000107148 0.000016346 -0.001004729 -0.000035784 0.000012402 0.000295074 -0.000288855 0.001546464 0.000038448 -0.000061394 -0.000012512 0.000067123 -0.000865135 0.000014021 0.000004420 0.000360878 -0.000003075 0.002240996 -0.000037365 -0.000030692 -0.000095766 -0.000125483 -0.003810663 0.000005849 0.000035016 -0.000094926 -0.000015160 -0.001258491 0.000000996 0.000001690 0.000013175 -0.000001077 0.000069749 0.000000913 -0.000001733 0.000059328 0.000004677 0.000244965 -0.000005304 0.000003114 -0.000069225 0.000007227 -0.000170752 -0.000001473 0.000014800 -0.000145286 0.000005559 -0.000082138 -0.000006475 0.000013083 -0.000178816 0.000003771 0.000083459 0.000003788 -0.000004489 0.000038285 0.000051501 0.001190934 0.000003933 0.000001727 0.000061741 -0.000006797 -0.000041653 0.000006543 -0.000013814 0.000093688 0.000011224 0.000095670 -0.000016627 -0.000008500 -0.000069971 -0.000012890 -0.000321730 -0.000000912 -0.000002521 -0.000029847 0.000003616 -0.000021221 0.000000793 -0.000005439 0.000015818 -0.000004313 0.000157542 -0.000001493 0.000002015 0.000057492 -0.000003315 0.000219362 -0.000002975 -0.000000571 -0.000018137 -0.000017847 -0.000246243 -0.000008373 0.000004048 -0.000065936 -0.000004294 -0.000453968 -0.000000893 0.000001363 -0.000074221 -0.000005044 -0.000286474 -0.000002888 -0.000001382 0.000026083 0.000009151 0.000088078 -0.000005406 0.000000645 -0.000021010 -0.000007193 0.000003029 0.000008175 -0.000000211 0.000025219 0.000003842 -0.000003844 0.000001625 -0.000003795 0.000059545 -0.000001965 -0.000006176 0.000008685 -0.000001808 0.000122303 0.000000406 0.000271685 0.000003396 -0.000003668 -0.000015805 0.000009749 0.000067984 0.000000161 -0.000001695 0.000010642 0.000002105 0.000014384 -0.000001745 0.000000965 -0.000008713 -0.000000703 -0.000013416 -0.000002519 -0.000000109 -0.000033880 -0.000000512 -0.000015762 0.000000046 -0.000002987 0.000017230 0.000003415 0.000000968 0.000001209 0.000000495 -0.000001003 -0.000000711 0.000039008 -0.000002397 0.000000992 -0.000024205 -0.000000357 0.000034613 0.000000261 -0.000001315 0.000005497 0.000002955 0.000018364 -0.000000784 0.000000422 -0.000003208 -0.000000395 0.000016106 -0.000003325 0.000000822 -0.000016594 -0.000000519 -0.000025351 -0.000000119 0.004882128 -0.004378796 0.002238817 0.009675419 -0.000474783 0.000200690 0.007605818 -0.001132577 0.003391943 -0.000283836 0.004203716 0.007633692 -0.007574221 0.001454274 0.000012796 0.000974233 0.001491693 0.001248491 0.000412774 0.000132929 0.000500264 -0.000737935 -0.000969317 0.000011768 0.000229012 -0.000576780 -0.002740686 0.000548760 -0.001894679 0.000003793 -0.000011043 0.000012281 -0.000000063 0.000011431 0.000002334 -0.000002336 -0.000000508 0.000001528 0.000016597 0.000001052 -0.000003418 -0.000005319 -0.000001128 -0.000000140 0.000194981 -0.000203390 0.002952604 0.000597216 0.002283118 -0.000047817 0.000006238 -0.000498436 -0.000139629 -0.000741658 -0.000061141 0.000010351 -0.000803094 -0.000424158 -0.000805885 -0.000123361 0.000144955 -0.001449050 -0.000259904 -0.001026003 -0.000041275 0.000007370 -0.000541131 -0.000180812 -0.000461948 0.000226932 -0.000179147 0.002865901 0.000574097 0.002501651 0.000049706 -0.000040981 0.000433557 0.000031792 0.000372451 -0.000131949 0.000095242 -0.001573259 -0.000212304 -0.000696389 -0.000126735 0.000063981 -0.001420063 -0.000224890 -0.000759058 -0.000059860 0.000003971 -0.000376061 -0.000036108 -0.000409125 0.000105202 -0.000058722 0.001184967 0.000141814 0.000663148 0.000038075 -0.000028768 0.000253762 0.000033860 0.000262607 0.000016650 -0.000001043 0.000107506 0.000011042 0.000107473 -0.000020510 0.000010199 -0.000194057 -0.000020816 -0.000145198 -0.000002043 0.000006555 0.000003201 0.000000544 -0.000001351 0.000008323 0.000004041 0.000016027 0.000002326 0.000053065 -0.000017344 0.000008220 -0.000174912 -0.000013529 -0.000121215 -0.000005851 0.000004262 -0.000014221 0.000001324 -0.000037979 0.000011686 -0.000001240 0.000068523 0.000005289 0.000068637 -0.000012153 0.000008235 -0.000156000 -0.000016528 -0.000071152 -0.000009951 0.000006336 -0.000062270 -0.000004013 -0.000056330 0.000066334 -0.000035964 0.000711254 0.000094629 0.000780926 0.000099741 -0.000082470 0.001220739 0.000264918 0.000961455 -0.000057148 0.000032827 -0.000504066 -0.000069213 -0.000588204 -0.000033752 0.000015676 -0.000253456 -0.000045123 -0.000240767 -0.000017566 0.000006475 -0.000161324 -0.000025554 -0.000124881 0.000042937 -0.000018900 0.000415539 0.000041172 0.000308452 -0.000003861 -0.000000547 -0.000014528 -0.000001548 -0.000026795 0.000006400 -0.000003375 0.000032002 -0.000000273 0.000050926 -0.000001935 -0.000001463 0.000000740 -0.000000008 -0.000024444 0.000002983 -0.000002141 0.000025651 0.000002873 0.000025196 -0.000000801 -0.000000259 -0.000005030 -0.000000798 -0.000001456 0.000002190 -0.000001697 0.000030057 0.000005822 0.000006553 -0.000005143 0.000003392 -0.000048560 -0.000003256 -0.000031172 0.000002522 0.000000404 0.000017556 0.000001952 0.000014769 -0.000001462 0.000000227 -0.000026268 -0.000004318 -0.000010846 0.000000163 -0.000004312 0.000044916 0.000000589 0.000005782 0.000006387 -0.000001854 0.000042750 0.000000216 0.000050094 0.000001421 -0.000000714 -0.000010528 -0.000000298 0.000011670 -0.000000952 -0.000000341 0.000000017 0.000001276 -0.000006024 0.000002645 0.000000390 0.000020593 -0.000000054 0.000014524 0.000001374 0.000001230 0.000011869 -0.000000517 0.000007277 -0.000001246 0.000000740 -0.000018244 -0.000003661 -0.000005590 -0.000003042 0.000000494 -0.000022020 -0.000001790 -0.000017819 -0.000002901 0.000001460 -0.000031345 -0.000003403 -0.000025065 0.000002495 -0.000001963 0.000030842 0.000003464 0.000015634 -0.000000951 -0.000000297 -0.000000509 0.000001228 -0.000003306 -0.000002903 0.000001791 -0.000035300 -0.000004190 -0.000017921 -0.000001798 0.000001729 -0.000026081 -0.000001775 -0.000007997 0.000001811 0.000000106 0.000009954 0.000000459 0.000010018 0.000001824 -0.000001715 0.000017555 0.000001308 0.000008683 -0.000002322 -0.000000035 -0.000015636 -0.000000640 -0.000012902 0.000001321 -0.000000896 0.000011400 0.000000448 0.000006697 0.000002594 0.000000263 0.000024825 0.000001339 0.000014946 0.000006862 -0.000001173 0.000063628 0.000005278 0.000048014 -0.000001827 -0.000001800 0.000001186 0.000002225 -0.000001065 -0.000005687 0.000002072 -0.000067800 -0.000009025 -0.000056049 0.000001528 -0.000002677 0.000019129 0.000009608 0.000001891 0.000001462 0.000000191 0.000012380 0.000003081 0.000012994 -0.000005924 0.000004705 -0.000057611 -0.000009510 -0.000049851 0.000000683 -0.000002784 0.000020375 0.000006583 0.000024347 0.000004002 -0.000001472 0.000031930 0.000005673 0.000029082 -0.000002574 0.000000830 -0.000026692 -0.000007550 -0.000029534 0.000006943 -0.000006645 -0.000011396 0.000006821 0.000108449 0.000009893 0.000016883 0.000098596 -0.000028657 0.000181078 0.000003113 -0.000027797 -0.000006197 0.000027979 0.000282499 -0.000011203 0.000003017 -0.000013946 0.000065938 -0.000575611 -0.000002393 -0.000034979 0.000002191 0.000070559 0.000004441 -0.000025236 0.000096536 -0.000181372 -0.000018859 -0.000537097 -0.000005820 0.000061608 0.000215759 -0.000083757 -0.001143874 0.000020100 0.000006545 -0.000196385 -0.000034879 0.000328143 0.000004336 0.000042950 0.000116781 -0.000067688 -0.001174233 -0.000015088 0.000016406 -0.000070498 0.000028151 -0.000077708 -0.000014456 -0.000032724 -0.000091715 0.000061973 0.000199943 0.000010329 -0.000019090 0.000018588 0.000044501 0.000250207 0.000002250 0.000004275 0.000004836 -0.000022397 -0.000007206 0.000003088 0.000022353 0.000071838 -0.000033271 -0.000317314 0.000006952 -0.000020877 0.000014211 0.000035679 -0.000000318 -0.000007464 0.000000001 -0.000026452 0.000006210 0.000100656 -0.000004046 -0.000008640 0.000007860 0.000015901 0.000160101 0.000005424 0.000010579 0.000068860 -0.000014484 -0.000190140 0.000015936 0.000017898 -0.000020935 -0.000045013 0.000052413 -0.000011045 0.000037696 -0.000009663 -0.000044242 -0.000041351 -0.000002046 0.000028321 -0.000091790 0.000018225 -0.000016678 0.000052406 -0.000023304 0.000130799 -0.000033145 -0.000917313 -0.000013721 0.000098877 0.000152620 -0.000077429 -0.000159296 0.000000954 0.000180864 0.000220688 -0.000217637 -0.000931619 0.000077484 -0.000055973 0.000259205 0.000012832 -0.000314196 0.000097369 -0.000078520 0.000256212 0.000015302 -0.000616826 0.000138161 -0.000029206 0.000141661 -0.000029125 -0.000463702 0.000003826 -0.000007840 0.000015260 0.000008841 0.000033711 0.000000538 -0.000000628 0.000003984 0.000001494 -0.000022659 0.000002240 -0.000004251 0.000012030 0.000007291 0.000030492 0.000001773 -0.000000767 0.000010328 -0.000002279 0.000026271 -0.000001295 0.000000323 0.000000134 0.000001491 0.000007526 0.000000664 -0.000005316 -0.000003048 0.000007350 0.000016476 -0.000000408 0.000005590 -0.000026910 -0.000002734 -0.000008765 -0.000000666 0.000000129 -0.000001226 0.000000530 -0.000002904 0.000000787 -0.000001104 0.000020604 0.000003510 0.000014912 -0.000000592 -0.000002261 0.000015592 0.000001428 0.000000599 -0.000000521 -0.000000960 0.000010978 0.000001389 0.000002063 -0.000000329 -0.000002599 0.000033624 0.000004234 0.000013018 -0.000001730 0.000012429 -0.000034140 -0.000002223 -0.000013072 0.000000568 0.000001849 -0.000006779 -0.000001080 -0.000000687 0.000002004 0.000000635 -0.000012637 -0.000003277 0.000000141 0.000001529 -0.000005636 -0.000008441 -0.000004806 -0.000006969 -0.000002470 -0.000000256 -0.000003476 -0.000000413 -0.000012867 -0.000000807 0.000000081 -0.000010670 -0.000000853 -0.000003774 -0.000003247 0.000005029 0.000028027 0.000006110 0.000010817 -0.000002234 0.000003062 -0.000012771 -0.000000979 -0.000016480 0.000000330 0.000005268 -0.000029265 -0.000003667 -0.000014117 0.000000067 -0.000000586 0.000001503 -0.000000131 -0.000000689 0.000001266 0.000000057 0.000005784 0.000000351 0.000008622 -0.000000467 0.000001344 -0.000001141 -0.000000075 -0.000001908 -0.000000470 -0.000000341 0.000000947 0.000000495 -0.000001291 0.000002098 -0.000000651 0.000014190 0.000000545 0.000013419 0.000000174 -0.000000165 0.000002826 0.000000142 0.000000967 -0.000001531 -0.000025157 0.000158374 0.000015134 0.000029719 0.000006742 -0.000008970 0.000059525 0.000001522 0.000041752 -0.000004133 -0.000012624 -0.000102309 -0.000013035 -0.000059064 -0.000001778 -0.000000362 0.000022659 0.000003539 0.000003567 0.000003067 -0.000001757 -0.000000466 -0.000001412 0.000013121 -0.000001927 -0.000000662 -0.000016680 -0.000002635 -0.000017400 0.000000707 -0.000002826 -0.000006398 -0.000001208 -0.000001318 0.000003684 -0.000000255 -0.000018544 -0.000001697 0.000006414 -0.000001285 -0.000001294 -0.000004518 -0.000002984 -0.000012946 -0.000011122 0.000006244 -0.000082993 0.000004414 -0.000001784 -0.000011471 0.000030055 -0.000053024 -0.000021043 0.000134647 -0.000095908 0.000033333 -0.000071452 0.000033186 0.000391308 -0.000103134 0.000106778 -0.000245206 -0.000086058 0.000245359 -0.000048768 -0.000014467 -0.000102223 0.000066074 0.000395794 -0.000124236 0.000101386 -0.000181227 0.000003174 0.000498855 0.000001942 0.000011834 -0.000045095 -0.000003543 0.000002236 -0.000005698 0.000007182 -0.000037663 0.000000528 -0.000030707 0.000001625 0.000010935 0.000035901 0.000006131 0.000026693 0.000001387 0.000007891 -0.000087448 -0.000010213 -0.000020034 -0.000006853 0.000004161 -0.000058157 -0.000002430 -0.000043540 0.000003130 0.000002316 0.000092181 0.000010788 0.000047604 -0.000001245 0.000006397 -0.000004904 -0.000006450 -0.000015147 0.000005070 -0.000004159 0.000003721 -0.000001844 0.000011896 0.000003519 -0.000006472 0.000021421 0.000003133 0.000020213 0.000003848 -0.000005286 0.000001579 0.000004396 0.000028566 0.000000416 -0.000002944 -0.000006053 0.000002754 0.000003810 -0.000003984 0.000005625 -0.000010566 -0.000002980 -0.000027282 0.000006935 -0.000003556 0.000009558 -0.000002714 0.000015360 -0.000009157 0.000003528 -0.000006732 0.000007034 -0.000015492 -0.000000336 -0.000003547 0.000012585 0.000000590 0.000004872 -0.000000789 0.000001770 -0.000003042 -0.000003136 -0.000007705 -0.000000411 -0.000003345 -0.000001912 0.000002019 0.000000981 0.000002734 -0.000005142 0.000016778 0.000002211 0.000014751 -0.000002605 0.000007538 -0.000012968 -0.000002390 -0.000011085 0.000002578 -0.000001381 0.000003334 -0.000001863 0.000007298 -0.000002439 0.000003203 -0.000010435 0.000001848 -0.000007342 -0.000002850 0.000001571 -0.000007166 0.000002097 -0.000009561 -0.000001624 0.000001687 -0.000003529 0.000001117 -0.000003302 0.000001009 0.000001351 -0.000004132 -0.000001549 0.000000331 -0.000004432 0.000001440 -0.000001180 0.000002663 -0.000014414 0.000002767 0.000001338 -0.000000491 -0.000002560 0.000001318 0.000001821 -0.000003697 0.000012569 0.000001953 0.000016606 -0.000001660 -0.000001208 -0.000002358 0.000002388 -0.000000669 -0.000002718 0.000003968 -0.000011476 0.000001508 -0.000007872 0.000001657 -0.000002056 0.000015292 0.000000066 0.000008343 0.000000848 0.000000141 -0.000002235 -0.000000503 0.000002964 0.000000876 -0.000001272 -0.000003894 -0.000000280 0.000001760 -0.000000330 0.000002254 -0.000008078 -0.000002509 -0.000008597 -0.000000464 0.000000396 -0.000004681 -0.000000758 -0.000004214 -0.000000849 -0.000001214 -0.000002033 0.000001195 -0.000004026 0.000000295 0.000001576 -0.000003983 -0.000001105 -0.000001252 0.000001719 0.000007912 -0.000011975 -0.000005776 -0.000003619 0.000003895 -0.000001895 -0.000007751 0.000001249 0.000022384 0.000002294 0.000001021 -0.000007595 -0.000001049 0.000006691 -0.000000562 0.000001524 -0.000002119 -0.000000147 -0.000002786 -0.000001649 -0.000000921 0.000004314 0.000000462 -0.000008116 -0.000001731 0.000000855 -0.000000905 0.000000322 -0.000007514 -0.000000029 -0.000003410 0.000004817 0.000001532 0.000002480 -0.000003397 0.000001936 0.000000840 0.000000061 -0.000016300 -0.000000506 -0.000001934 0.000007579 0.000001018 0.000000283 -0.000000439 0.000001192 -0.000002737 -0.000000462 -0.000003450 -0.000000575 0.000001863 -0.000003431 -0.000000794 -0.000005389 0.000000226 0.000000296 0.000001204 -0.000000240 0.000000934 0.000000623 0.000001997 -0.000002572 -0.000001346 0.000000378 0.000000823 -0.000000022 0.000000836 -0.000000439 0.000003478 -0.000000210 0.000002190 -0.000005626 -0.000001152 -0.000003942 -0.000000742 0.000000164 0.000001538 0.000000028 -0.000003758 -0.000000138 0.000000458 0.000000564 -0.000000240 -0.000000634 -0.000000564 0.000000563 -0.000001934 -0.000000085 -0.000003403 -0.000000979 -0.000000217 0.000000781 0.000000229 -0.000004759 0.000002883 -0.000002070 -0.000000392 -0.000000172 0.000013780 0.000001030 -0.000000705 0.000002314 0.000000060 0.000005975 -0.000001772 0.000002469 -0.000002426 -0.000000624 -0.000010333 -0.000000880 -0.000000145 0.000002384 -0.000000118 -0.000004641 -0.000000603 0.000000483 0.000002654 -0.000000087 -0.000002543 0.000000650 0.000000248 -0.000000229 -0.000000266 0.000003318 -0.000000195 -0.000000836 0.000002499 0.000000283 -0.000000602 -0.000000129 0.000000049 -0.000001852 -0.000000269 -0.000001823 -0.000000300 -0.000000067 0.000000905 0.000000031 -0.000001624 -0.000000699 -0.000000568 0.000001964 0.000000568 -0.000002508 -0.000000639 -0.000000038 -0.000001080 0.000000226 -0.000003327 -0.000022180 -0.000051364 -0.000204096 0.000061867 -0.001364697 0.000002362 0.000027000 0.000057079 -0.000058887 -0.000066757 0.000011581 0.000130424 -0.000030305 0.000202995 -0.001541313 -0.000013202 -0.000010155 0.000017121 -0.000005357 0.000216925 -0.000002600 -0.000008241 0.000024749 0.000019235 -0.000043436 -0.000002394 0.000000748 -0.000008851 -0.000008146 -0.000019187 0.000016307 0.000088201 0.000143112 0.000060208 -0.000540648 -0.000013405 -0.000008836 0.000096622 0.000009509 0.000118819 -0.000004322 -0.000046727 -0.000003684 -0.000003227 0.000430564 -0.000017669 0.000146435 -0.000181685 0.000199408 -0.002293182 0.000012240 0.000006520 0.000259652 -0.000121853 -0.000278372 -0.000016022 -0.000250541 -0.000299030 -0.000065501 0.000362177 -0.000005813 0.000006277 0.000028255 -0.000043596 0.000407612 0.000006052 0.000005421 0.000256157 0.000040342 0.000219878 0.000005791 0.000011443 0.000065292 0.000056044 0.000151382 0.000004330 0.000014449 0.000069875 0.000014205 0.000203825 -0.000004697 -0.000004035 -0.000083728 -0.000033271 -0.000100602 0.000003505 -0.000003880 0.000001370 -0.000001428 -0.000035284 0.000001142 -0.000005903 -0.000006714 -0.000013511 0.000037299 0.000000627 -0.000005342 -0.000015066 0.000008148 -0.000003919 -0.000002702 0.000006767 0.000012982 0.000011516 -0.000032195 -0.000014919 -0.000062214 -0.000067345 0.000034054 -0.000439395 -0.000003654 -0.000005474 -0.000036088 0.000028023 0.001101698 0.000010983 -0.000001782 -0.000208652 -0.000076323 -0.000469865 0.718286844 0.003647787 0.626725296 -0.010448410 0.014895887 0.174706346 0.065480892 -0.015601448 0.009108574 0.771204060 0.031679731 -0.044184796 -0.148889709 -0.025149771 0.669955112 0.024956487 -0.003207784 0.012548799 -0.019259832 -0.010122964 -0.014868563 -0.030120359 -0.005431476 -0.038127528 0.018830188 -0.085249053 0.025149149 -0.010410604 0.070595518 0.045328994 -0.000397206 0.017870942 -0.006054388 0.009378982 0.007008831 -0.333271338 -0.047476510 0.007983357 -0.047018664 -0.027555588 0.026518120 -0.122506302 0.006167977 -0.033794525 -0.026167679 -0.012225369 0.044396321 -0.087914669 0.006853347 0.055630526 -0.182658625 0.113984089 0.028556394 -0.150274116 -0.099247527 0.035353807 -0.222146758 0.056981338 -0.024498552 -0.288511351 0.001132379 0.002034186 -0.051727066 -0.037305678 0.052612898 -0.000929445 -0.001785958 -0.037648103 -0.162318530 0.134007836 -0.003357642 -0.002506190 0.052904922 0.131145766 -0.227415940 0.000142588 0.002948308 0.005651535 -0.000374894 0.002821439 0.001442199 -0.001668011 -0.000731806 -0.000089619 0.003550895 -0.000708760 -0.003304148 0.002582908 0.002415536 -0.003136833 -0.000521239 -0.000570075 -0.000749621 0.000342447 -0.000304941 -0.012344955 0.025129931 0.000171036 -0.000656313 -0.000894690 -0.003998049 0.005442718 -0.000287948 -0.000962922 0.000399078 -0.008374954 0.055980020 0.004821949 -0.003434524 0.001267263 -0.139170828 -0.073343268 -0.000071141 -0.003636494 0.003646356 -0.067911978 -0.216263156 0.002067711 0.008741515 0.003888860 0.009896849 0.029679554 0.000817709 0.003560095 0.002047251 0.011854896 0.002201613 -0.000613351 0.001122837 0.000797912 0.009075472 -0.036112975 -0.000281192 -0.000651157 -0.002433609 0.000951326 -0.004054837 0.000050058 0.000015076 -0.000119717 -0.000710790 -0.001349197 0.000083508 -0.000305298 -0.000211629 0.001789581 0.000186827 0.000015784 -0.000046868 0.000041185 -0.006765623 0.000428125 -0.000073816 -0.000797916 -0.000003197 0.001002330 0.001281551 0.000219902 0.000158028 0.000134510 0.002097480 0.001832366 0.000020112 0.000124636 0.000035849 -0.000097295 0.000094151 -0.000003844 -0.000020108 -0.000007328 -0.000159325 0.000043023 -0.000009642 -0.000044888 -0.000038271 0.000204913 -0.000009448 0.000026368 0.000061521 0.000032548 0.000180149 0.000582929 -0.000015766 0.000087588 0.000091303 0.000604434 0.000207630 -0.000004817 0.000151070 0.000073409 -0.000037414 -0.000444022 -0.000060186 -0.000015530 -0.000079443 -0.000032780 -0.000367859 -0.000004162 -0.000027107 -0.000044726 -0.000512943 -0.000189465 -0.000017285 -0.000125160 -0.000057895 0.000277691 -0.000430547 0.000038791 0.000090859 0.000023071 0.000303162 -0.000005924 0.000016964 0.000053256 0.000010363 -0.000001648 -0.000214522 -0.000009938 0.000015223 -0.000008055 -0.000119893 0.000149817 -0.000002034 -0.000053487 -0.000043880 0.000541335 0.000081668 0.000025087 0.000065859 0.000002682 0.000061835 -0.000034087 0.000039738 0.000046985 0.000056989 0.000329558 0.000073149 0.000010189 0.000064105 0.000037348 -0.000233474 -0.000193175 -0.000011206 -0.000025790 -0.000016665 -0.000016251 0.000049149 0.000003706 0.000019000 0.000011535 -0.000036393 -0.000001927 -0.000003606 -0.000026359 -0.000002952 -0.000229937 -0.000100704 -0.000006981 -0.000107453 -0.000046980 0.000009652 -0.000418905 0.000008305 -0.000148391 -0.000091436 0.000056650 -0.000218850 -0.000006674 0.000062211 0.000030354 -0.000014401 -0.000023263 -0.000005126 -0.000007971 -0.000008283 0.000024656 0.000023442 0.000003796 0.000002639 0.000000868 0.000074470 0.000034616 0.000001122 0.000049660 0.000022806 -0.000020343 -0.000075121 -0.000002859 -0.000003966 -0.000012042 -0.000011045 -0.000000328 -0.000002838 0.000001525 0.000003075 0.000081689 0.000042306 -0.000001129 0.000018476 0.000003757 -0.000054379 -0.000053259 -0.000005208 -0.000006411 -0.000001302 0.000016716 -0.000000013 0.000001127 0.000005350 0.000000263 0.000016047 0.000057624 0.000001627 0.000008601 0.000004785 -0.008967383 0.000494033 0.008513842 0.014649508 0.005857505 -0.048703188 0.002561648 0.005254185 -0.048281502 -0.020779916 0.034175110 0.003935125 0.004263191 -0.058555079 -0.001292923 -0.001203544 -0.000262610 0.001743329 0.002026707 -0.000608510 0.003252256 0.000055076 -0.001532995 -0.001036445 0.003292724 0.007993033 0.003189194 -0.001436605 0.008661440 0.004191365 -0.000024564 -0.000053456 -0.000025193 -0.000002774 0.000001688 0.000006150 -0.000035235 -0.000005368 0.000019807 0.000008678 0.000000927 -0.000004278 -0.000008788 0.000008294 0.000007060 -0.002546105 -0.011072745 -0.000067155 -0.001672955 -0.001935203 0.000226147 0.001522341 0.000061029 0.000156083 0.000159569 0.001344168 0.003097398 -0.000047496 0.000442935 0.000605781 0.001271068 0.005582934 0.000046792 0.000823069 0.000931950 0.000396346 0.001597095 0.000043269 0.000237094 0.000376022 -0.002683819 -0.008956787 -0.000113168 -0.001683496 -0.001881810 -0.000395607 -0.001312846 -0.000048178 -0.000240675 -0.000276677 0.000914235 0.003774933 0.000080590 0.000979022 0.001091978 0.000871584 0.003769662 0.000093442 0.000830740 0.001023540 0.000320863 0.001198344 0.000011244 0.000148032 0.000178986 -0.000951543 -0.002952649 -0.000058344 -0.000799812 -0.000841287 -0.000234572 -0.000960499 -0.000056753 -0.000084248 -0.000167541 -0.000082835 -0.000343846 -0.000001991 -0.000038134 -0.000053413 0.000177421 0.000526376 0.000013041 0.000115257 0.000134033 0.000006671 0.000045349 0.000014284 -0.000007638 0.000005174 0.000006110 -0.000111616 0.000005457 0.000025239 0.000016390 0.000174878 0.000416565 0.000009257 0.000129115 0.000122333 0.000023175 0.000094778 0.000012189 -0.000005949 0.000005859 -0.000046741 -0.000220193 -0.000001839 -0.000023661 -0.000030458 0.000120588 0.000357226 0.000006938 0.000114536 0.000115774 0.000050381 0.000201125 0.000013022 0.000025608 0.000038046 -0.000612181 -0.002110033 -0.000027293 -0.000349690 -0.000423742 -0.000788141 -0.003695541 -0.000041117 -0.000517177 -0.000721913 0.000490875 0.001702316 0.000051456 0.000229230 0.000333688 0.000263948 0.000870489 0.000018911 0.000128964 0.000151976 0.000120849 0.000498460 0.000010776 0.000082179 0.000104114 -0.000227549 -0.001011048 -0.000040176 -0.000214676 -0.000272175 0.000013792 0.000067286 0.000000008 -0.000003253 0.000002096 -0.000047607 -0.000120548 -0.000008284 -0.000010627 -0.000021906 0.000003112 0.000032545 -0.000001734 -0.000014685 -0.000009225 -0.000031846 -0.000076130 -0.000002704 -0.000013987 -0.000018300 -0.000001888 0.000016527 0.000000075 0.000001495 0.000001553 -0.000017046 -0.000074099 -0.000000644 -0.000020677 -0.000020670 0.000041757 0.000123318 0.000005927 0.000032305 0.000037806 -0.000009513 -0.000049326 0.000000292 -0.000006110 -0.000008000 0.000017531 0.000057452 -0.000001396 0.000018516 0.000017466 -0.000072230 -0.000054349 -0.000006299 -0.000068118 -0.000047670 -0.000058259 -0.000119264 -0.000003056 -0.000028399 -0.000025920 0.000011722 -0.000018031 -0.000003511 0.000023275 0.000012102 0.000001796 -0.000000564 -0.000000016 -0.000000802 -0.000002813 -0.000023902 -0.000033020 0.000000803 -0.000018814 -0.000010282 -0.000012886 -0.000008345 0.000002742 -0.000013324 -0.000005801 0.000008354 0.000051099 0.000000378 0.000010424 0.000012113 0.000017910 0.000062441 0.000000593 0.000012011 0.000012571 0.000029721 0.000083131 0.000001096 0.000018908 0.000023531 -0.000025879 -0.000072773 -0.000001911 -0.000022216 -0.000023134 0.000001183 0.000002803 0.000000314 -0.000000706 -0.000000678 0.000025427 0.000084736 0.000001287 0.000023627 0.000025465 0.000021956 0.000055380 0.000002208 0.000022085 0.000022141 -0.000005748 -0.000030322 0.000000061 -0.000003360 -0.000004253 -0.000015378 -0.000042121 -0.000002794 -0.000012599 -0.000013961 0.000013986 0.000035840 -0.000000278 0.000009694 0.000007815 -0.000009939 -0.000028406 -0.000001372 -0.000007728 -0.000008119 -0.000021772 -0.000050557 0.000000968 -0.000018903 -0.000015354 -0.000044738 -0.000158684 -0.000001589 -0.000038168 -0.000040176 -0.000007258 -0.000019968 0.000000477 -0.000002345 -0.000005518 0.000034546 0.000176549 0.000004444 0.000033839 0.000045068 -0.000007332 -0.000146311 0.000002563 -0.000005367 -0.000019057 -0.000022806 -0.000054309 0.000002850 -0.000012090 -0.000007079 0.000039087 0.000200669 0.000005594 0.000027210 0.000040709 -0.000021731 -0.000080141 -0.000002495 -0.000005413 -0.000015683 -0.000025713 -0.000106153 -0.000002169 -0.000012712 -0.000018090 0.000023602 0.000092324 -0.000000430 0.000011063 0.000014688 -0.000008784 -0.000065556 0.000031028 -0.000001681 -0.000011267 0.000077920 0.000182812 0.000098320 -0.000136613 -0.000164994 0.000175662 0.000302123 -0.000037294 0.000053169 0.000055755 -0.000067304 -0.000421603 -0.000157606 0.000064639 0.000129112 -0.000190941 -0.000661238 -0.000090800 0.000056946 0.000066159 -0.000105401 0.000026913 0.000173451 0.000119790 0.000012808 0.000103125 -0.000792291 0.000078719 -0.000129056 -0.000175246 0.000328749 0.001275116 -0.000080779 0.000084416 0.000175777 0.000029542 -0.000571683 0.000049170 -0.000067347 -0.000010272 0.000016072 0.000151726 0.000027584 0.000113180 0.000063289 -0.000143653 -0.000308885 0.000035918 0.000139051 0.000058574 0.000206237 0.000428152 0.000006669 -0.000014096 -0.000018226 -0.000046442 0.000001431 -0.000009880 -0.000040907 -0.000008079 -0.000189784 -0.000616038 -0.000017398 -0.000098563 -0.000039521 -0.000163443 -0.000390004 -0.000043131 -0.000018355 0.000027168 0.000094385 0.000197352 0.000019242 0.000025779 -0.000000299 0.000031296 0.000135042 -0.000002097 0.000032138 0.000012859 -0.000172172 -0.000464663 -0.000027224 -0.000066212 -0.000025229 0.000124481 0.000307320 0.000114235 -0.000012554 -0.000090668 0.000048851 0.000188122 0.000070877 -0.000014846 -0.000074714 -0.000061730 0.000019620 0.000024214 0.000067618 0.000030439 0.000737461 -0.000448084 -0.000033615 -0.000212520 -0.000032007 -0.000172697 -0.000208783 0.000004443 -0.000139224 -0.000106398 0.000595100 -0.000256574 0.000054279 -0.000206720 -0.000177793 0.000031083 0.000332924 -0.000091361 -0.000301557 -0.000086931 0.000290262 0.001373383 -0.000127845 -0.000379135 -0.000064344 0.000839931 0.000751952 0.000013192 -0.000284164 0.000059084 -0.000040261 -0.000075030 -0.000010901 -0.000004334 -0.000003634 -0.000012483 0.000014852 0.000001023 -0.000007139 -0.000000417 -0.000024205 -0.000023507 -0.000003512 -0.000002967 -0.000004286 -0.000008900 -0.000019907 0.000001429 0.000003879 -0.000006167 -0.000007180 0.000004531 0.000001621 -0.000003988 -0.000003990 -0.000001994 -0.000039524 -0.000016597 0.000023996 0.000019691 0.000040305 0.000037658 0.000008013 0.000031119 0.000028158 0.000000823 0.000006510 0.000000890 -0.000000025 -0.000001055 -0.000021190 -0.000043656 0.000000847 -0.000014374 -0.000019102 -0.000023752 -0.000012562 -0.000002510 -0.000023366 -0.000017467 -0.000016012 -0.000010799 -0.000000237 -0.000014707 -0.000013246 -0.000044508 -0.000046425 -0.000000052 -0.000038058 -0.000036858 0.000061388 0.000061667 0.000021551 0.000040179 0.000036385 0.000013132 0.000004397 0.000002119 0.000011043 0.000008638 0.000016237 0.000002522 -0.000002938 0.000020129 0.000015854 -0.000005220 0.000009293 -0.000014404 -0.000000113 0.000007681 -0.000004704 0.000033589 0.000000552 -0.000012090 -0.000003824 0.000009062 0.000022465 0.000000907 0.000007959 0.000005970 -0.000034411 -0.000015990 0.000018434 -0.000036022 -0.000041722 0.000015856 0.000042930 0.000004629 0.000003039 0.000010752 0.000051147 0.000042083 0.000004504 0.000035685 0.000039699 -0.000003579 0.000000312 -0.000001350 -0.000002725 -0.000001775 -0.000002865 -0.000019653 0.000000397 0.000000572 -0.000002604 0.000001705 0.000007268 0.000003052 -0.000000645 -0.000001112 -0.000001814 0.000000575 -0.000000104 -0.000002381 -0.000002013 -0.000013015 -0.000038890 -0.000001011 -0.000007169 -0.000009088 -0.000003785 -0.000005492 -0.000000216 -0.000002906 -0.000003304 -0.000235491 -0.000192257 -0.000028513 -0.000203259 -0.000186670 -0.000075795 -0.000144397 -0.000015382 -0.000047421 -0.000053566 0.000070269 0.000180027 -0.000031644 0.000070263 0.000072576 -0.000032516 -0.000015927 0.000004244 -0.000031864 -0.000031370 0.000003762 -0.000031980 -0.000005307 0.000014339 0.000006334 0.000011494 0.000046256 -0.000002635 0.000002927 0.000012437 0.000004002 0.000004167 -0.000006621 0.000007767 0.000006695 0.000044539 -0.000011138 -0.000004596 0.000046172 0.000032100 -0.000007545 0.000025341 -0.000005008 -0.000013092 0.000004230 0.000124688 -0.000025001 0.000041133 0.000080187 0.000041530 0.000015355 -0.000251699 0.000043978 0.000074870 0.000016839 -0.000585254 -0.000793033 -0.000032156 0.000170314 -0.000053758 -0.000110126 -0.000379278 0.000064003 0.000224566 0.000015912 -0.000129379 -0.001045438 0.000063429 0.000244865 0.000039825 -0.000677130 -0.001059455 0.000009836 0.000271300 -0.000032783 0.000083169 0.000035922 0.000015619 0.000072024 0.000065347 0.000049040 0.000106594 0.000013941 0.000026249 0.000033353 -0.000006893 -0.000067490 0.000023615 -0.000013410 -0.000017671 0.000115580 0.000104902 0.000003758 0.000104121 0.000097442 0.000060317 0.000143033 0.000006511 0.000039779 0.000044452 -0.000087082 -0.000156693 0.000012468 -0.000077081 -0.000076744 0.000009164 0.000044553 0.000013107 -0.000009548 -0.000006860 0.000004472 -0.000024783 -0.000002004 0.000006020 0.000002971 -0.000001245 -0.000047826 -0.000008938 -0.000006639 -0.000007792 0.000016002 -0.000061148 -0.000006998 0.000040181 0.000012320 -0.000003834 -0.000018499 -0.000009451 0.000013799 0.000010931 -0.000009187 0.000062634 0.000006245 -0.000020638 -0.000000493 0.000016186 -0.000036103 -0.000004634 0.000007337 0.000000085 -0.000018367 0.000035518 0.000003675 -0.000003335 -0.000008904 -0.000009531 -0.000007059 -0.000004180 -0.000011836 -0.000013800 -0.000001799 0.000017257 0.000000511 -0.000006282 0.000001152 -0.000008543 -0.000003252 -0.000005794 0.000001606 0.000004116 0.000002601 -0.000034494 -0.000005269 0.000002084 -0.000016537 0.000001494 0.000030098 0.000012645 0.000000706 0.000005519 0.000006439 -0.000017009 -0.000002731 0.000004784 0.000001250 -0.000001233 0.000016083 0.000004884 0.000003887 0.000008739 -0.000005937 0.000021345 0.000001843 -0.000003458 0.000005228 -0.000001132 0.000007846 0.000002312 0.000001085 0.000002099 0.000005813 -0.000000607 0.000001615 0.000004431 0.000007158 -0.000013949 0.000030442 0.000002425 -0.000013636 -0.000011368 0.000015321 -0.000004126 0.000002618 0.000004564 0.000005181 -0.000005385 -0.000035475 -0.000002987 0.000001827 -0.000010056 -0.000007330 0.000001636 -0.000002539 0.000002102 0.000002215 -0.000002981 0.000015373 0.000003413 0.000006622 0.000008246 -0.000001195 -0.000016421 0.000001282 -0.000009523 -0.000019405 0.000005112 -0.000007681 -0.000000944 0.000006993 0.000005722 0.000001900 -0.000006412 -0.000004986 0.000007510 0.000008448 0.000006361 0.000019562 0.000002030 0.000000624 0.000008921 -0.000000582 0.000009010 -0.000001045 -0.000000257 0.000005882 -0.000004048 0.000008090 -0.000002780 -0.000003110 0.000002931 0.000004705 0.000003122 0.000001873 0.000003218 0.000005816 0.000028541 0.000019174 0.000014677 0.000012621 0.000013287 0.000024839 -0.000044687 -0.000005256 0.000037237 0.000022108 0.000020831 -0.000013298 0.000000837 0.000021947 0.000015212 0.000004965 0.000008413 0.000003390 0.000000168 0.000002275 -0.000015007 0.000015822 -0.000000792 -0.000016885 -0.000009540 -0.000003219 0.000019474 0.000002472 -0.000007894 -0.000003293 -0.000012442 -0.000009766 -0.000006892 -0.000004610 -0.000005470 -0.000010858 0.000036814 0.000005034 -0.000020231 -0.000010070 -0.000011695 -0.000001736 -0.000002229 -0.000010752 -0.000010433 0.000002648 0.000010066 0.000002423 -0.000000708 0.000001807 0.000003471 0.000015056 0.000003681 -0.000000868 0.000000933 0.000000945 -0.000000426 0.000001114 -0.000000748 -0.000001219 0.000007910 0.000002352 0.000004006 0.000003826 0.000003532 0.000002808 -0.000007602 0.000000119 0.000002842 0.000000836 0.000006420 0.000010081 0.000003471 0.000003331 0.000005412 -0.000004581 0.000008815 0.000000718 -0.000006306 -0.000004802 -0.000000362 0.000002002 0.000000932 -0.000001733 -0.000001006 -0.000000088 0.000007771 0.000000790 -0.000001122 0.000000554 -0.000005042 0.000009542 -0.000000105 -0.000006183 -0.000003920 0.000006447 -0.000033281 -0.000005956 0.000015866 0.000008930 0.000000101 -0.000013943 -0.000001533 0.000003293 0.000000080 -0.000000314 0.000026562 0.000005408 -0.000008157 -0.000002904 -0.000008190 0.000008399 -0.000000222 -0.000009694 -0.000004807 -0.000004456 0.000005735 0.000001548 -0.000006968 -0.000004662 0.000003223 -0.000007149 0.000000192 0.000003803 0.000002566 -0.000005643 -0.000000393 -0.000001470 -0.000004497 -0.000003490 0.000000569 0.000003754 -0.000000389 0.000000422 0.000001662 -0.000002456 0.000003565 0.000000149 -0.000003089 -0.000002392 -0.000005410 0.000004958 -0.000000658 -0.000005298 -0.000004512 -0.000001626 0.000007037 -0.000000117 -0.000002100 -0.000000518 0.000032929 -0.000223943 0.000072122 0.000131919 0.000363216 0.000454526 0.001147293 -0.000072670 -0.000144822 -0.000250914 0.000576361 0.001983961 -0.000003091 -0.000038787 -0.000250518 -0.000173313 -0.000199038 -0.000019680 0.000002855 -0.000107790 -0.000143250 -0.000290539 0.000015816 0.000025785 -0.000005160 0.000032578 0.000182270 0.000017897 0.000022408 0.000071157 0.000200271 0.000308954 0.000052856 -0.000135544 -0.000135351 -0.000150751 -0.000249379 0.000010397 -0.000057286 -0.000091047 -0.000249232 -0.000322652 -0.000023919 0.000020790 0.000056125 0.000163743 0.000673943 0.000101576 0.000139680 0.000001107 0.000549991 0.000165672 0.000083619 -0.000131262 -0.000027269 -0.000263631 -0.000044367 -0.000178947 0.000358451 0.000074335 -0.000366391 -0.000157391 -0.000043831 -0.000131629 0.000040844 -0.000126960 -0.000938316 0.000009688 -0.000077059 -0.000115163 -0.000275696 -0.000247206 -0.000031711 -0.000041855 0.000032642 -0.000180894 -0.000231534 0.000033767 -0.000025514 -0.000011320 0.000159069 0.000255111 -0.000018588 0.000075540 0.000029207 0.000036446 0.000020572 -0.000017895 -0.000003443 -0.000013892 -0.000065560 0.000147858 0.000004261 0.000002595 0.000000336 0.000052997 -0.000067418 0.000003039 0.000027644 0.000039009 0.000071850 -0.000047217 0.000009390 0.000000007 0.000004055 0.000074085 0.000027296 0.000160331 -0.000290802 -0.000178209 -0.001280651 -0.000332214 -0.000154555 -0.000163942 -0.000115301 0.000741343 0.000696954 -0.000121969 0.000412167 0.000232538 0.172161952 -0.013945836 0.764452729 -0.143784404 0.008200460 0.661176776 -0.082844174 0.036445222 0.068302447 0.182047055 0.016639589 -0.172080396 -0.055742677 -0.014583954 0.702540289 0.069460936 -0.123271169 -0.312182394 -0.151781838 -0.015095612 -0.010205984 -0.003788619 0.021411116 0.007559377 -0.018189084 -0.001698986 0.005464155 0.006872121 -0.006397549 -0.034243130 0.019301388 0.007638766 -0.076060900 -0.013494402 0.072405441 0.006520560 0.000360471 0.001303444 -0.000525493 0.000080405 0.000549370 -0.004974791 -0.001926816 0.000280512 -0.000298605 0.001350464 -0.001234827 0.001796628 -0.000079502 -0.001417873 -0.036651287 0.013707540 0.006432948 0.002112258 0.008365670 0.013534534 -0.342247331 -0.023776420 -0.000274488 -0.007994409 0.007177272 -0.023219314 -0.060251298 0.000964016 -0.028453381 0.002740082 -0.005283575 0.005627403 -0.046638069 -0.026535534 0.002833997 0.012263918 -0.012009382 -0.028019267 -0.156634129 0.004444910 0.017919155 -0.014767836 0.045004839 0.132815185 0.007596822 -0.000956949 0.002277604 0.000680151 0.006349936 -0.000646716 -0.005159565 0.004519973 0.011579452 -0.018079622 -0.000425143 0.001081553 -0.000360071 0.004520390 -0.017503799 -0.000251843 -0.000543261 -0.003494213 0.001024745 -0.000630578 -0.000912243 -0.000111430 -0.000977394 0.001126030 -0.001245382 0.000075871 0.000193444 0.001180827 0.000723927 0.002657660 0.000097025 0.000475761 -0.000063806 -0.000428484 -0.000669782 0.000004017 0.000149855 0.000412136 0.001580632 0.000196228 -0.000153877 -0.000116204 -0.000163223 0.000798135 -0.000183622 -0.000025396 0.000050953 0.000227310 0.000258871 0.000115227 0.000138481 0.000245678 0.000069106 0.000052154 -0.000503474 -0.000002651 -0.000089293 -0.000075786 -0.000241766 0.000067467 0.000000667 -0.000009377 0.000012781 0.000014315 -0.000018892 -0.000013028 -0.000013484 0.000055748 -0.000007603 -0.000035371 0.000038297 -0.000001451 -0.000073359 0.000050516 0.000068488 0.000001241 -0.000012820 -0.000153424 0.000044418 0.000084057 0.000015428 -0.000029611 -0.000174191 0.000071475 0.000172502 -0.000011720 -0.000056028 -0.000014720 0.000011041 0.000166619 -0.000010085 -0.000004373 0.000068446 0.000039754 -0.000050115 0.000004277 -0.000066753 0.000066426 -0.000068579 0.000059061 0.000080685 0.000104068 -0.000056806 0.000156566 0.000037747 0.000000622 -0.000000093 -0.000031050 0.000018235 0.000010485 0.000006269 0.000045476 0.000018962 0.000017781 -0.000044728 -0.000013401 -0.000014703 0.000057884 -0.000019730 -0.000064858 0.000009216 0.000010242 0.000010540 -0.000004522 -0.000049940 0.000029349 0.000054991 -0.000059373 0.000001039 0.000012383 0.000015970 -0.000009655 -0.000066709 0.000026975 0.000044338 -0.000010012 0.000034704 0.000006000 -0.000058025 -0.000031017 0.000012046 0.000034128 -0.000015594 0.000008377 -0.000027209 -0.000021388 -0.000033794 0.000026479 -0.000024356 0.000006090 -0.000004470 -0.000022721 0.000042328 -0.000054234 -0.000014661 -0.000031309 -0.000029793 0.000083939 -0.000045909 0.000001010 0.000000315 0.000040198 -0.000007776 -0.000011564 0.000016894 -0.000006312 0.000000348 0.000008769 -0.000012925 -0.000003950 0.000006461 -0.000001033 -0.000010212 0.000008494 0.000003397 0.000012182 0.000019555 -0.000024828 0.000019837 0.000000198 -0.000007785 0.000004237 0.000015683 -0.000019360 -0.000016689 -0.000001601 -0.000000048 -0.000000076 0.000000493 0.000001442 0.000006633 -0.000001318 -0.000025343 0.000014759 0.000021270 -0.000001017 0.000005728 0.000003063 -0.000011982 0.000000884 0.000001350 0.000004704 -0.000003333 0.000003580 -0.000003148 0.000006932 0.000003064 -0.000016879 0.000008247 0.000004076 -0.000095983 0.002345953 -0.003132755 0.004562309 0.001339446 -0.000754805 -0.008096139 0.001750149 0.000375551 0.002873425 -0.002293321 -0.002509097 0.006532816 0.004539691 -0.003754124 -0.000293620 -0.000894836 0.000531805 0.000282027 0.000125193 -0.000093452 0.001159600 -0.000011946 0.000950326 -0.000321077 0.000378173 0.002484241 -0.001045209 0.000061304 -0.000472723 -0.000015549 0.000007641 0.000014361 -0.000029339 -0.000008704 -0.000003433 0.000009026 0.000004491 -0.000002999 -0.000004070 -0.000003584 0.000006536 -0.000001544 -0.000007339 -0.000001173 -0.000216470 -0.000526530 0.002476423 -0.001008500 -0.000885025 0.000044671 -0.000004725 -0.000442731 0.000466727 0.000056439 -0.000013796 0.000267118 -0.000420404 0.000584733 -0.000305672 0.000231818 0.000320998 -0.001204901 0.000479088 0.000378911 -0.000002300 0.000075490 -0.000439709 0.000316555 0.000294793 -0.000385381 -0.000605996 0.002378316 -0.001267134 -0.000983885 -0.000119078 -0.000122433 0.000394155 -0.000163263 -0.000221401 0.000318236 0.000455189 -0.001339720 0.000826643 0.000807450 0.000258786 0.000368745 -0.001171775 0.000863682 0.000772126 0.000075482 0.000072580 -0.000367650 0.000153476 0.000206588 -0.000249798 -0.000357212 0.000980517 -0.000585835 -0.000542834 -0.000078814 -0.000033030 0.000233497 -0.000197101 -0.000178155 -0.000023213 -0.000019575 0.000104997 -0.000047357 -0.000066870 0.000046387 0.000049576 -0.000168122 0.000101814 0.000102931 0.000007426 -0.000001230 0.000003252 0.000017182 0.000007127 0.000001941 0.000004749 0.000028853 0.000008249 -0.000013307 0.000042067 0.000055581 -0.000147356 0.000080329 0.000077860 0.000011203 -0.000002986 -0.000019230 0.000022702 0.000022470 -0.000014483 -0.000014818 0.000068434 -0.000027336 -0.000039310 0.000034771 0.000051362 -0.000126533 0.000075386 0.000070098 0.000019728 0.000012836 -0.000060027 0.000043820 0.000043577 -0.000104414 -0.000132844 0.000662544 -0.000230751 -0.000373209 -0.000113827 -0.000171044 0.001141216 -0.000561646 -0.000708847 0.000115207 0.000097931 -0.000447252 0.000245733 0.000329223 0.000052584 0.000078625 -0.000216542 0.000143022 0.000127435 0.000025840 0.000043515 -0.000137020 0.000069795 0.000095674 -0.000097391 -0.000099620 0.000376696 -0.000232926 -0.000277657 0.000005079 -0.000001754 -0.000017608 0.000005858 0.000010998 -0.000014231 -0.000004157 0.000032232 -0.000021788 -0.000025130 0.000000102 -0.000007927 -0.000004997 -0.000001447 0.000006574 -0.000008020 -0.000005188 0.000022689 -0.000013977 -0.000014201 -0.000000036 0.000001389 -0.000004830 0.000003242 0.000003278 -0.000004318 -0.000010033 0.000023940 -0.000014990 -0.000011305 0.000013599 0.000015466 -0.000040155 0.000029758 0.000027912 -0.000003365 -0.000003103 0.000017213 -0.000008722 -0.000012080 0.000004024 0.000006832 -0.000021369 0.000011477 0.000010431 -0.000012955 -0.000023489 0.000028801 -0.000031115 -0.000015556 -0.000013046 -0.000011099 0.000039761 -0.000017388 -0.000021885 -0.000000364 0.000010474 -0.000004110 -0.000002206 -0.000003336 0.000000032 0.000001233 -0.000001522 -0.000003202 -0.000000907 -0.000003806 -0.000009057 0.000018832 -0.000003162 -0.000004946 -0.000000785 -0.000007385 0.000010299 0.000002529 -0.000000096 0.000002553 0.000004601 -0.000014978 0.000010454 0.000008951 0.000004604 0.000006035 -0.000020195 0.000009297 0.000011058 0.000007697 0.000007850 -0.000026256 0.000014602 0.000016485 -0.000007009 -0.000009877 0.000025062 -0.000015431 -0.000014507 0.000000842 0.000000553 -0.000001476 0.000000335 0.000001139 0.000007313 0.000010823 -0.000029362 0.000016784 0.000017229 0.000007811 0.000009594 -0.000019589 0.000014971 0.000010992 -0.000001968 -0.000002312 0.000010282 -0.000003450 -0.000005928 -0.000004979 -0.000006382 0.000014359 -0.000011483 -0.000010010 0.000002715 0.000005665 -0.000014735 0.000004235 0.000007072 -0.000003672 -0.000003404 0.000009838 -0.000006699 -0.000005674 -0.000004811 -0.000008957 0.000021324 -0.000007250 -0.000008944 -0.000013297 -0.000018562 0.000057018 -0.000025274 -0.000034642 0.000001028 0.000001145 -0.000003224 0.000002908 0.000003256 0.000012147 0.000012758 -0.000060402 0.000031610 0.000042862 -0.000002124 -0.000004099 0.000008130 -0.000018104 -0.000004686 0.000000373 -0.000006086 0.000009032 0.000000868 0.000006575 0.000012337 0.000013592 -0.000048032 0.000035362 0.000035845 -0.000001197 0.000000173 0.000016048 -0.000013401 -0.000017935 -0.000004683 -0.000005701 0.000029722 -0.000014551 -0.000020027 -0.000000241 0.000004020 -0.000025687 0.000008894 0.000013097 0.000017357 -0.000013843 -0.000010491 0.000017575 -0.000000588 0.000021818 -0.000100730 0.000077691 0.000154557 -0.000311538 0.000051008 0.000017236 -0.000050049 0.000128132 -0.000225208 0.000045667 0.000011296 -0.000107641 -0.000025267 0.000245390 -0.000073375 0.000143817 -0.000001783 -0.000148088 0.000072493 -0.000051654 0.000103094 -0.000035605 -0.000145984 0.000120630 -0.000023928 0.000004037 0.000314580 -0.000501486 0.000017020 0.000368472 -0.000244427 -0.000357209 0.000036267 0.000036690 0.000005337 0.000040968 0.000354429 -0.000794454 0.000254113 -0.000048417 0.000105695 0.000021868 -0.000146634 0.000042497 -0.000062911 0.000137625 -0.000000612 -0.000081920 -0.000072121 0.000063358 -0.000100812 -0.000033693 0.000163841 -0.000176469 0.000010426 -0.000016448 -0.000003928 -0.000006617 0.000055028 -0.000069028 0.000003031 0.000105817 -0.000120049 0.000289803 -0.000058044 -0.000001674 0.000043436 -0.000045433 0.000208194 0.000025412 0.000011949 -0.000037967 0.000051288 -0.000127205 0.000003869 0.000034195 -0.000009864 0.000036017 -0.000123097 -0.000083142 0.000016080 0.000106796 -0.000104053 0.000244083 -0.000019133 0.000024910 0.000042517 0.000077323 -0.000212129 0.000056351 -0.000080302 -0.000008382 0.000035138 -0.000031283 0.000041929 -0.000019428 -0.000064045 0.000013403 0.000098873 -0.000057369 -0.000231562 0.000040183 -0.001122878 0.000023471 -0.000144598 0.000045112 0.000242193 -0.000006503 0.000249328 0.000093744 -0.000159712 0.000045313 -0.001175815 -0.000259321 -0.000180917 -0.000406433 0.000338700 0.000361455 0.000572852 -0.000189096 -0.000694805 0.000401414 0.000833213 0.001058881 0.000134055 -0.000849872 0.000251511 0.000581450 0.001057283 -0.000014580 0.000000676 0.000010638 -0.000002169 -0.000015368 -0.000018472 -0.000004464 0.000020853 0.000001785 0.000043016 -0.000017346 0.000001321 0.000016626 -0.000007294 -0.000002294 -0.000007003 0.000006336 0.000012985 -0.000008243 -0.000023086 0.000001797 0.000000485 -0.000002760 -0.000005575 -0.000007818 -0.000007937 0.000016590 -0.000000643 -0.000012142 0.000013554 0.000010513 0.000010459 -0.000015969 0.000017856 0.000007165 0.000000339 0.000000091 -0.000002494 0.000000682 0.000001282 -0.000004884 -0.000007517 0.000014299 -0.000006725 -0.000007551 -0.000004768 -0.000008020 0.000008237 -0.000009411 -0.000002681 -0.000002882 -0.000005587 0.000005675 -0.000004455 -0.000002195 -0.000008034 -0.000016451 0.000019982 -0.000012226 -0.000008952 0.000018634 0.000011261 -0.000022733 0.000034648 0.000012449 0.000002359 0.000003584 -0.000003232 0.000004276 0.000000844 0.000000432 0.000009056 -0.000004532 0.000001015 -0.000001079 -0.000004239 0.000003898 -0.000004003 -0.000011844 0.000000634 0.000002765 -0.000004797 -0.000007883 0.000003064 0.000007314 0.000004002 0.000001943 -0.000007805 0.000006766 0.000004331 0.000002668 -0.000021793 0.000012310 0.000009808 -0.000003880 0.000006144 0.000001570 -0.000012903 0.000008954 0.000009599 0.000008820 0.000015922 -0.000016419 0.000012721 0.000008355 -0.000001152 -0.000000336 0.000000635 -0.000001961 -0.000000106 -0.000001222 -0.000001083 0.000006259 -0.000000405 -0.000003752 0.000001803 -0.000001408 -0.000001790 0.000003442 0.000001040 -0.000000372 -0.000000695 -0.000000211 -0.000000961 0.000000234 -0.000004040 -0.000003985 0.000013160 -0.000005990 -0.000007750 -0.000001055 -0.000001354 0.000001615 -0.000001617 -0.000001053 -0.000052941 -0.000078674 0.000089124 -0.000094140 -0.000042276 -0.000023189 -0.000020644 0.000048048 -0.000039842 -0.000031232 0.000010320 0.000031903 -0.000079899 0.000006496 0.000035312 -0.000003445 -0.000015473 0.000009767 -0.000003743 -0.000002976 -0.000003325 0.000006068 0.000007019 -0.000005134 -0.000007467 0.000004273 0.000002812 -0.000015259 0.000005273 0.000011068 -0.000001033 0.000004704 -0.000002825 -0.000002839 0.000000278 0.000000310 0.000019805 -0.000001964 0.000000682 -0.000004272 0.000000327 -0.000001587 -0.000006475 -0.000002823 0.000006851 0.000074530 0.000009085 -0.000081939 0.000015302 0.000031128 0.000069982 0.000116152 -0.000090632 -0.000174504 -0.000284420 -0.000070497 0.000602419 -0.000166447 -0.000767467 -0.000746863 0.000180045 0.000622855 -0.000396534 -0.000490370 -0.000862039 0.000083247 0.000266214 -0.000171894 -0.000667006 -0.000259385 -0.000032808 0.000828231 -0.000303700 -0.000877025 -0.000855124 0.000019188 0.000027770 -0.000019178 0.000035002 0.000009182 0.000017462 0.000011625 -0.000033036 0.000029998 0.000023543 0.000002509 -0.000008338 0.000031303 0.000010626 -0.000013122 0.000023581 0.000040978 -0.000050919 0.000039450 0.000022670 0.000017659 0.000018854 -0.000049305 0.000029412 0.000029708 -0.000016517 -0.000032963 0.000067682 -0.000022773 -0.000031625 0.000007670 -0.000008136 -0.000002775 0.000009781 -0.000003105 -0.000009848 0.000008334 0.000008274 -0.000005106 -0.000012289 -0.000003609 -0.000006845 0.000015219 0.000006872 -0.000005924 -0.000009792 0.000020833 0.000010515 -0.000011528 -0.000011743 -0.000008267 0.000014329 -0.000001735 -0.000014549 0.000003397 0.000008881 -0.000010880 -0.000015311 0.000006224 0.000013321 -0.000002943 -0.000000176 0.000013074 0.000009128 -0.000011848 0.000005125 0.000000120 -0.000012219 -0.000009108 0.000013379 -0.000003030 -0.000003466 0.000006085 -0.000003778 -0.000003666 0.000001497 -0.000001906 -0.000002799 0.000000269 0.000003085 -0.000006400 0.000008320 -0.000003259 -0.000011748 0.000002416 -0.000003451 -0.000001820 0.000013492 0.000001433 -0.000012551 0.000007143 -0.000004118 -0.000008244 0.000004624 0.000006739 -0.000001634 0.000001233 0.000005417 0.000001475 -0.000005295 0.000002406 0.000001856 -0.000008710 -0.000001241 0.000007349 0.000001961 0.000000632 -0.000009317 -0.000002228 0.000008508 0.000001755 0.000000393 -0.000003439 -0.000000565 0.000003148 0.000000968 0.000000996 -0.000001124 0.000002303 0.000000248 0.000002953 -0.000005646 -0.000007097 -0.000002827 0.000006669 0.000002529 -0.000001348 0.000003125 0.000010627 -0.000004138 -0.000005056 0.000000092 0.000011095 -0.000003822 -0.000008049 -0.000003363 0.000005974 -0.000003345 -0.000009181 0.000003330 0.000003032 0.000003561 -0.000009163 -0.000003188 0.000007930 -0.000000101 -0.000009554 0.000011846 0.000006294 -0.000009436 -0.000000495 0.000003259 0.000000446 -0.000000277 -0.000000716 -0.000002621 0.000006157 -0.000001886 -0.000004986 0.000001144 0.000002975 0.000000613 -0.000006198 0.000003928 0.000004173 0.000000337 0.000001503 -0.000004343 -0.000001358 0.000003742 -0.000000791 0.000001433 -0.000004406 -0.000002752 0.000004164 0.000001524 0.000000739 -0.000001896 0.000002352 0.000001111 0.000011002 -0.000003883 -0.000002478 0.000019071 -0.000001900 -0.000002999 0.000016339 0.000002734 -0.000002794 -0.000005211 0.000001881 0.000006718 0.000000597 0.000003996 -0.000003112 0.000003131 -0.000001607 -0.000001299 0.000004229 0.000000837 -0.000000243 -0.000006449 -0.000001161 -0.000003091 0.000002529 0.000002245 -0.000003405 -0.000003628 0.000002041 0.000003381 -0.000005213 0.000001705 0.000001277 -0.000009021 -0.000000015 0.000003897 -0.000008865 -0.000005368 0.000003666 0.000005826 -0.000002152 -0.000003726 0.000003053 -0.000003395 -0.000000838 0.000001910 -0.000001093 -0.000002558 0.000002905 0.000001800 0.000002953 -0.000002005 -0.000003226 0.000003913 0.000001613 0.000000660 -0.000001389 0.000001261 0.000001602 -0.000000896 0.000002909 -0.000001183 0.000000198 0.000005290 -0.000001076 -0.000000169 0.000000366 0.000002172 0.000000943 -0.000001954 0.000002676 0.000000248 -0.000003357 0.000003810 0.000001586 0.000000299 -0.000002618 -0.000000860 0.000000137 0.000001053 0.000000717 -0.000001287 0.000000360 0.000001005 0.000000019 0.000000832 -0.000000309 -0.000002435 0.000000660 0.000001695 -0.000000237 -0.000001564 -0.000001879 -0.000000391 0.000001955 -0.000004182 0.000007989 0.000004636 -0.000005234 -0.000004588 -0.000001701 0.000001458 0.000003376 -0.000001710 -0.000002500 0.000004373 -0.000005215 -0.000004515 0.000005521 0.000003508 0.000000053 -0.000003611 -0.000000421 -0.000001087 0.000001559 0.000000831 -0.000003628 0.000000915 0.000000851 0.000000187 0.000000203 0.000000940 0.000001625 0.000000551 -0.000001366 -0.000001356 -0.000001053 0.000000718 -0.000002304 0.000000104 0.000000162 0.000000604 -0.000001767 -0.000000031 0.000001107 -0.000000112 -0.000001208 -0.000000294 -0.000000162 0.000000422 -0.000000778 -0.000001339 -0.000000577 -0.000001412 0.000000981 0.000000111 -0.000000164 -0.000002276 -0.000000236 0.000001751 0.000064238 0.000055992 -0.000276050 0.000123291 0.000011876 -0.000026759 0.000092839 0.000305240 0.000210018 -0.000064334 0.000056901 -0.000197126 -0.000412199 -0.001069558 -0.000298685 0.000075638 0.000112387 0.000192028 0.000265654 -0.000091792 0.000025763 0.000036569 0.000052427 0.000044257 -0.000013660 -0.000062960 -0.000056316 -0.000156108 -0.000163275 0.000038159 0.000006898 -0.000093841 -0.000024705 -0.000343096 -0.000315777 0.000024841 0.000027714 0.000134972 0.000103277 0.000053948 0.000008261 0.000037536 0.000094166 0.000186520 0.000168557 0.000192671 -0.000167823 -0.000527042 -0.001633659 0.000608208 -0.000214286 -0.000293156 -0.000019246 0.000124159 -0.000197007 0.000015922 0.000018822 0.000055328 0.000380447 0.000596117 0.000001144 -0.000080616 -0.000059672 -0.000003699 0.000171642 0.000027946 0.000009365 0.000200384 -0.000095326 -0.000049916 -0.000023270 0.000012385 0.000081236 0.000057656 0.000105404 -0.000017632 -0.000004011 0.000053443 -0.000005326 -0.000035354 0.000011177 0.000040417 -0.000054040 -0.000002269 -0.000038949 -0.000006477 -0.000008541 -0.000000335 -0.000020439 0.000006829 -0.000004555 0.000019930 0.000021983 -0.000014497 -0.000085062 0.000020505 0.000030331 0.000014604 0.000010392 0.000034792 0.000000961 -0.000007958 -0.000009222 0.000010806 0.000027303 0.000019114 -0.000234372 -0.000162444 0.000051138 0.000175600 0.000012937 -0.000006814 -0.000046733 -0.000089249 0.000039183 0.000023011 0.000211618 0.000002586 0.000011364 -0.000216133 0.728077163 -0.014788548 0.212508401 0.020239630 -0.005681914 0.759166669 0.050224688 -0.132570508 0.021186916 0.665436041 -0.000271816 0.004258164 -0.004758167 0.006984047 0.041938152 -0.001068866 0.002881273 0.009663913 -0.011542557 0.040264956 -0.000021553 0.006183493 0.021626489 -0.016355981 -0.058472147 0.000190946 -0.000579657 -0.000041139 -0.000159923 0.000372547 0.002272123 0.000003950 0.000798748 0.000224535 0.000050860 0.002120061 0.000211332 0.000081570 -0.001522871 0.000080776 0.042807135 0.005619630 0.000395375 0.001285757 -0.000438976 0.130994254 0.001546242 -0.004055835 -0.002647515 -0.000025810 -0.236659808 0.000946962 -0.001530935 0.000984019 -0.000105906 0.005910975 -0.001599716 0.014107925 0.017575343 -0.000435949 -0.044196998 -0.004273987 0.011806584 0.015077625 -0.000146292 -0.013710061 0.017451972 -0.020793606 -0.043149225 0.000137311 -0.003538989 0.002565999 -0.011073100 -0.007617281 0.000211337 -0.003453699 0.001391987 -0.002719584 -0.003544989 0.000005510 0.001455250 0.000323537 -0.002630778 0.001812544 -0.000005731 0.001366333 0.000040984 0.000120143 0.000002258 -0.000017252 -0.000895136 -0.000167972 -0.000619779 0.000611712 -0.000008627 -0.000424872 0.000024202 0.000768274 -0.000099206 -0.000033669 -0.000141667 -0.001175780 0.001585598 0.001784502 -0.000008491 0.000070348 0.000215447 -0.000110639 -0.000315701 -0.000025808 -0.000034434 0.000486399 -0.000301496 -0.000464321 -0.000002805 -0.000002659 0.000000550 0.000094997 0.000024304 -0.000002671 0.000014989 -0.000037512 0.000196757 0.000064203 0.000000296 0.000005840 -0.000026817 -0.000226246 -0.000066752 -0.000003455 -0.000079395 0.000071947 -0.000248235 -0.000140945 -0.000005008 -0.000077551 0.000124695 -0.000566230 -0.000244379 -0.000000611 0.000026415 -0.000076607 0.000001255 0.000094947 0.000004435 0.000018484 0.000051156 0.000088384 0.000059960 -0.000001102 -0.000081021 -0.000093756 0.000489902 0.000202322 0.000003329 -0.000016632 -0.000048203 -0.000579175 0.000017820 -0.000001789 0.000018155 0.000019818 -0.000129905 -0.000095123 -0.000003924 0.000050050 0.000015906 -0.000179151 0.000030372 0.000002007 0.000010566 -0.000022406 0.000290636 0.000032036 -0.000001876 0.000003298 0.000058631 -0.000195917 -0.000140878 0.000002144 0.000052121 -0.000032711 -0.000232951 -0.000036450 -0.000002037 -0.000048725 0.000072258 -0.000219834 -0.000123346 0.000000041 0.000077528 -0.000034916 0.000065785 0.000083907 0.000002846 0.000015143 -0.000010160 -0.000100324 -0.000005610 0.000000560 -0.000036243 0.000000941 0.000113103 0.000008603 -0.000000586 0.000006769 -0.000032017 0.000423769 0.000067408 0.000002819 0.000109083 -0.000062137 0.000581484 0.000050804 -0.000000915 0.000043933 0.000018877 -0.000377239 -0.000004887 0.000004232 0.000000255 0.000002348 0.000028227 0.000009157 0.000002541 0.000000748 -0.000000274 0.000005348 -0.000009804 -0.000001067 -0.000002227 0.000014969 -0.000217924 -0.000025367 -0.000000157 0.000007382 0.000001474 0.000016644 0.000013833 0.000002121 -0.000003724 0.000000531 -0.000019444 -0.000001117 0.000000089 -0.000008803 0.000010937 -0.000056222 -0.000025953 -0.000000296 0.000009870 -0.000007010 0.000006873 0.000020571 0.000001226 0.000008962 0.000000056 -0.000020575 -0.000004739 -0.000000101 -0.000002818 0.000004710 -0.000011518 -0.000010887 -0.000000490 0.005862258 -0.048829119 0.000144194 -0.000252696 -0.003618044 0.001639528 0.008730697 -0.367118074 0.009978626 -0.000576718 -0.007786892 0.001816735 -0.016167052 -0.109996544 -0.001907209 -0.000948019 -0.005228120 0.004822862 0.005633543 -0.000306127 -0.001048099 -0.002660326 -0.034772770 -0.036401868 0.000033638 -0.000886941 0.004401983 -0.023644221 0.009089780 0.000195057 -0.000003571 0.000017216 -0.000038893 -0.000002282 0.000019734 0.000001121 0.000006737 -0.000115531 0.000000505 0.000003454 -0.000001552 0.000008486 -0.000058933 -0.000007696 0.000008056 0.001257262 -0.000793868 0.007338305 0.002904685 -0.000079437 -0.000082753 -0.000337461 -0.000271823 -0.000176299 0.000025341 -0.000413671 0.000905179 -0.001850970 -0.001084522 0.000021280 -0.000635288 0.000302384 -0.003224896 -0.001336204 0.000002069 -0.000273321 0.000248637 -0.001127688 -0.000429335 0.000007077 0.000831614 -0.000914802 0.006915434 0.002470740 -0.000034176 0.000100558 -0.000014806 0.001034132 0.000320533 0.000001606 -0.000281864 0.000318725 -0.004861310 -0.001076777 0.000018064 -0.000315770 0.000296977 -0.003816355 -0.000944398 -0.000007270 -0.000049323 0.000034467 -0.000253870 -0.000219514 0.000008821 0.000195294 -0.000243000 0.003614924 0.000829182 -0.000008318 0.000060641 0.000057717 0.000075378 0.000127099 0.000036264 0.000011892 -0.000004793 0.000049954 0.000055418 -0.000002911 -0.000026602 0.000008153 -0.000428197 -0.000115907 -0.000002970 -0.000006606 -0.000015507 0.000050939 0.000001623 -0.000012196 0.000003520 -0.000009559 -0.000179869 0.000009263 -0.000006382 -0.000019539 0.000025060 -0.000531789 -0.000114656 -0.000000581 -0.000002345 -0.000025763 0.000099994 0.000003836 -0.000009663 0.000009603 -0.000010762 0.000050405 0.000043141 -0.000002236 -0.000023111 0.000031572 -0.000547053 -0.000109988 0.000001976 -0.000010582 -0.000007040 -0.000062828 -0.000035069 -0.000007643 0.000127816 -0.000105138 0.001176798 0.000539850 0.000002469 0.000409349 -0.000235287 0.002142009 0.000855191 -0.000005051 -0.000142648 0.000027029 -0.000774169 -0.000352497 -0.000016572 -0.000073094 0.000040238 -0.000555871 -0.000177117 -0.000001010 -0.000042619 0.000037110 -0.000312775 -0.000117216 -0.000003165 0.000051624 -0.000039885 0.000893671 0.000261496 0.000007145 0.000000654 -0.000004250 0.000071717 -0.000002421 0.000000533 0.000002016 0.000021006 -0.000029209 0.000010644 0.000005588 0.000001509 -0.000013248 0.000124374 0.000011688 0.000001119 0.000002524 0.000005805 0.000031857 0.000012724 0.000001724 -0.000001675 0.000004541 -0.000010741 -0.000004315 0.000000477 0.000006747 -0.000015610 0.000109358 0.000025045 -0.000000580 -0.000007587 0.000004899 -0.000141685 -0.000032006 -0.000002359 0.000001555 -0.000002031 0.000015711 0.000007850 -0.000001392 -0.000003232 0.000007714 -0.000085758 -0.000017468 0.000002227 0.000000370 0.000008349 0.000308597 0.000021446 0.000005776 0.000004141 0.000004883 0.000071567 0.000020547 0.000001699 0.000000868 0.000014157 -0.000139371 -0.000012539 0.000002921 0.000001089 0.000002361 0.000007745 -0.000000992 0.000000193 -0.000000948 -0.000009850 0.000080935 0.000015891 -0.000001748 -0.000000829 -0.000011343 0.000068017 0.000011973 -0.000002872 -0.000003699 0.000005355 -0.000050453 -0.000012642 0.000000520 -0.000003040 0.000003524 -0.000042611 -0.000014041 0.000000445 -0.000004915 -0.000000797 -0.000070364 -0.000018854 0.000000357 0.000005221 -0.000005090 0.000104703 0.000021555 0.000000098 0.000001395 -0.000000083 0.000010179 0.000000438 -0.000000206 -0.000005975 0.000006074 -0.000112325 -0.000023990 0.000000781 -0.000003002 0.000004579 -0.000107416 -0.000018851 -0.000000722 0.000000374 -0.000001889 0.000005463 0.000005645 -0.000000589 0.000003074 -0.000001683 0.000060350 0.000011781 0.000001347 -0.000000925 0.000005400 -0.000038612 -0.000011057 0.000001164 0.000000659 -0.000001028 0.000030336 0.000007462 0.000000679 0.000000875 -0.000008708 0.000082526 0.000018283 -0.000001995 0.000004882 -0.000012499 0.000148466 0.000041742 -0.000000342 0.000008314 -0.000005020 0.000012090 0.000008295 0.000000718 -0.000009818 0.000011896 -0.000124329 -0.000046143 -0.000000628 0.000020628 -0.000008987 0.000019697 0.000013627 0.000001822 0.000002246 -0.000009045 0.000040850 0.000013738 -0.000001165 -0.000020989 0.000005245 -0.000125424 -0.000040381 -0.000001432 0.000016806 -0.000002597 0.000025186 0.000015847 0.000001430 0.000008835 -0.000003770 0.000038057 0.000021192 0.000000441 -0.000006928 0.000005557 -0.000032586 -0.000017702 0.000000586 0.000052011 -0.000080279 0.000036724 -0.000017207 -0.000001711 0.000011091 -0.000029772 0.000911120 -0.000149879 -0.000016918 0.000074912 0.000091234 -0.000084788 -0.000239427 0.000005537 0.000123104 0.000092485 -0.000261301 0.000139869 0.000017448 -0.000009067 -0.000059534 -0.000750420 0.000001417 0.000012930 0.000040819 -0.000272452 -0.000386286 0.000143286 -0.000039312 -0.000515344 0.000013415 0.000331340 0.000232951 -0.000005151 0.000244829 0.000176600 0.000868527 -0.000320060 0.000001955 -0.000776179 -0.000021545 -0.000288853 0.000215527 0.000000502 0.000015268 -0.000048841 -0.000587394 0.000057026 -0.000009364 -0.000052202 -0.000032795 -0.000543608 -0.000127085 -0.000005576 0.000123366 0.000141614 0.000740139 -0.000265828 -0.000006262 0.000008252 -0.000036579 0.000047749 0.000051770 0.000000441 -0.000133750 -0.000112618 -0.000205542 0.000307386 0.000006641 -0.000094447 -0.000051560 -0.000140258 0.000081497 0.000012703 0.000055739 0.000057434 0.000103223 -0.000088842 -0.000006039 0.000075317 0.000045381 -0.000054448 -0.000074931 -0.000001520 -0.000115558 -0.000066770 -0.000265379 0.000239906 0.000007117 -0.000024968 -0.000149147 -0.000011083 -0.000126646 -0.000013040 0.000067868 0.000046131 0.000578643 0.000064824 -0.000003801 0.000048468 0.000014166 0.000121439 0.000033404 -0.000014240 -0.001360060 -0.000004684 0.000168719 0.000157824 0.000006669 -0.000275114 -0.000073066 -0.000406093 0.000362988 0.000001675 -0.000627284 -0.000099875 0.000193439 0.000353708 -0.000005161 -0.000427877 0.000095398 0.000939723 0.000150287 0.000023352 -0.000485623 0.000157819 0.001330268 0.000037998 0.000028951 -0.000984243 0.000058164 0.001022077 -0.000229501 -0.000023005 0.000009777 0.000003002 0.000023195 0.000010013 0.000002784 -0.000039237 -0.000002586 -0.000019472 0.000011745 -0.000000389 -0.000005443 0.000002798 0.000001276 0.000011292 0.000001007 0.000003772 0.000001329 -0.000037267 0.000005704 0.000000754 0.000010006 -0.000001967 0.000047192 0.000000165 -0.000000197 -0.000001188 0.000013151 -0.000149069 0.000007800 0.000004112 -0.000002809 -0.000001536 -0.000154191 -0.000020635 -0.000005528 0.000000940 -0.000000698 0.000009057 0.000001217 -0.000000757 0.000003822 -0.000003764 0.000073041 0.000018950 -0.000002207 0.000000908 -0.000001343 0.000117704 0.000010533 0.000001765 0.000001526 -0.000001042 0.000076717 0.000009397 -0.000000046 0.000004509 -0.000004330 0.000195763 0.000028928 -0.000001134 -0.000002386 -0.000011317 -0.000177632 -0.000023485 -0.000018151 -0.000000070 -0.000000570 -0.000053839 -0.000005469 -0.000001944 -0.000001440 0.000007788 -0.000115724 -0.000014289 0.000003011 -0.000002589 0.000011924 -0.000022863 -0.000012056 0.000013979 0.000000028 -0.000003981 0.000081570 0.000003001 0.000000244 -0.000001175 0.000000389 -0.000034164 -0.000005332 0.000001092 0.000006890 -0.000014819 0.000216613 0.000036102 -0.000015427 -0.000001255 -0.000005384 0.000005492 -0.000006741 -0.000004661 -0.000005900 -0.000001588 -0.000183990 -0.000033056 -0.000004997 0.000000180 0.000000661 0.000014395 0.000000829 0.000001023 0.000000531 -0.000000917 -0.000008245 0.000004451 -0.000000692 0.000000684 -0.000002086 0.000011364 0.000001074 -0.000002406 0.000000256 -0.000000236 0.000014041 0.000001276 0.000000033 0.000001269 -0.000000690 0.000022891 0.000009008 0.000000150 0.000001038 -0.000000011 0.000016202 0.000002747 0.000000012 0.000021015 -0.000005926 0.001053089 0.000130400 0.000020687 0.000007542 0.000008880 0.000196009 0.000039729 0.000011196 -0.000009409 0.000038731 -0.000336162 -0.000068797 0.000032387 0.000004690 -0.000005991 0.000183508 0.000025550 -0.000004483 -0.000001315 0.000008585 -0.000100644 -0.000006164 0.000005039 -0.000001531 -0.000000603 -0.000000711 -0.000008149 0.000003427 -0.000001331 0.000003854 -0.000047201 -0.000006954 0.000007215 -0.000005666 0.000004867 -0.000262399 -0.000033743 0.000004237 -0.000001937 0.000002219 0.000059675 -0.000005543 0.000004327 0.000045379 -0.000026892 -0.000226048 -0.000093270 -0.000012572 0.000089490 -0.000037824 -0.000268448 -0.000034343 -0.000013900 0.000594200 -0.000006972 -0.000525833 0.000199773 0.000020857 0.000283136 -0.000062182 -0.000701005 0.000006120 -0.000017501 0.000282377 -0.000072449 -0.000762378 -0.000003727 -0.000005337 0.000306932 -0.000038735 -0.000908501 0.000135894 0.000003839 -0.000008164 -0.000003054 -0.000390857 -0.000042612 -0.000012785 -0.000004901 -0.000011596 -0.000093936 -0.000023671 -0.000010877 0.000002314 -0.000022811 0.000060594 0.000021361 -0.000022696 -0.000010898 0.000011564 -0.000542531 -0.000070425 -0.000000772 -0.000006587 0.000001415 -0.000160366 -0.000038223 -0.000003023 0.000008704 -0.000022428 0.000370283 0.000064504 -0.000014641 -0.000000634 -0.000006876 0.000073604 -0.000010135 -0.000002622 -0.000005523 -0.000000083 -0.000071109 -0.000001687 0.000005087 -0.000005270 0.000008377 0.000001510 0.000003456 0.000004558 0.000001315 0.000010846 -0.000225616 0.000003108 0.000007402 0.000001801 0.000008434 -0.000086155 0.000000248 0.000004699 0.000000301 -0.000005683 0.000139336 -0.000001217 -0.000007624 -0.000005607 -0.000000451 -0.000077663 -0.000005555 0.000004104 0.000009078 0.000001637 0.000081717 0.000008981 -0.000001354 0.000000783 0.000003498 0.000063889 0.000004157 0.000006279 -0.000000387 -0.000000625 0.000036733 -0.000003465 -0.000000455 0.000001293 0.000005002 -0.000014007 0.000003118 0.000003486 0.000000637 0.000002605 -0.000018014 0.000002851 0.000008088 0.000001156 -0.000006377 0.000028519 -0.000000288 -0.000009129 -0.000001089 0.000001482 -0.000039731 -0.000002593 0.000003055 0.000000820 -0.000001427 -0.000007271 0.000000501 -0.000005941 0.000000943 -0.000000415 0.000027459 0.000001565 -0.000004073 0.000001035 -0.000000266 0.000003520 0.000000544 -0.000002418 -0.000001201 -0.000000896 -0.000030193 -0.000002885 -0.000002016 0.000003408 -0.000002068 0.000103654 0.000003988 -0.000001474 -0.000004729 -0.000003589 -0.000044038 -0.000006259 -0.000002600 0.000001460 0.000002702 -0.000010871 0.000008319 0.000004624 0.000002199 0.000003635 -0.000004474 0.000003009 0.000001385 0.000003473 -0.000000871 -0.000012543 0.000002199 -0.000006068 -0.000001300 -0.000003429 0.000049567 0.000002820 0.000003417 -0.000000204 0.000001544 -0.000042705 -0.000002379 0.000000261 0.000000535 0.000004332 -0.000047643 -0.000002456 0.000001935 -0.000001593 -0.000001017 -0.000005521 -0.000005552 -0.000002367 -0.000000167 0.000000834 -0.000000797 -0.000001799 -0.000000501 -0.000000155 0.000001476 0.000012029 -0.000000054 0.000000369 -0.000000651 -0.000000768 -0.000019667 -0.000002259 -0.000002094 -0.000004524 -0.000010329 -0.000064830 -0.000012590 -0.000009890 0.000000931 0.000004665 -0.000217311 -0.000010038 0.000002142 -0.000002291 0.000001494 -0.000123096 -0.000007634 -0.000000994 -0.000002053 -0.000003342 -0.000002499 -0.000003068 -0.000002402 -0.000000313 -0.000001063 0.000095572 0.000005229 0.000000624 -0.000000589 -0.000002856 0.000049307 0.000000399 -0.000001751 0.000002660 0.000004722 0.000024506 0.000005525 0.000004659 -0.000000880 -0.000004662 0.000122760 0.000003088 -0.000003052 0.000000743 0.000000440 0.000059597 0.000005504 0.000002311 -0.000000680 -0.000002043 0.000006397 -0.000001675 -0.000001952 -0.000000637 -0.000002616 0.000012056 -0.000001919 -0.000002766 -0.000000598 -0.000001286 0.000003947 0.000000095 -0.000000658 -0.000001534 -0.000002860 -0.000020729 -0.000002955 -0.000002721 -0.000000331 -0.000000037 -0.000018715 -0.000000589 0.000000290 -0.000000758 -0.000001899 -0.000015566 -0.000003535 -0.000002748 0.000000431 -0.000000712 0.000039904 0.000001899 -0.000000339 -0.000000314 -0.000000760 0.000009818 0.000000077 -0.000000544 0.000000243 -0.000000256 0.000009608 -0.000000474 -0.000000711 0.000000728 0.000000152 0.000039301 0.000002441 0.000000225 0.000001128 0.000005521 -0.000099580 -0.000002224 0.000003716 0.000000546 0.000001244 -0.000021998 0.000000785 0.000001096 -0.000001119 -0.000004400 0.000054803 -0.000000647 -0.000003745 -0.000000183 -0.000000312 0.000053172 0.000002665 0.000000315 -0.000000641 -0.000001740 0.000039269 0.000002007 -0.000000879 -0.000000498 -0.000000010 -0.000024819 -0.000001233 -0.000000174 0.000000467 0.000000736 0.000024045 0.000002274 0.000001112 0.000000143 0.000000538 -0.000001671 -0.000000890 0.000000201 0.000000207 -0.000000321 0.000019074 0.000001119 -0.000000027 0.000000727 0.000000261 0.000032712 0.000002383 0.000000563 0.000000406 0.000000192 0.000014492 0.000000236 0.000000021 -0.000047675 0.000095683 -0.000388743 -0.000354589 -0.000040767 -0.000373680 -0.000366332 -0.000449415 0.000107516 0.000043230 -0.000194624 -0.000604175 0.001014062 -0.000472647 0.000011792 -0.000058653 0.000003695 -0.000337492 0.000077570 0.000019529 -0.000001267 0.000021756 -0.000247939 -0.000000697 0.000005649 0.000098191 0.000012004 0.000117933 -0.000047370 -0.000020813 -0.000095197 -0.000215110 0.000682025 -0.000199884 -0.000031694 -0.000014445 -0.000109346 0.000043082 0.000158080 0.000003823 0.000030047 0.000106337 -0.000180180 0.000179840 0.000001362 -0.000101903 -0.001280371 -0.000404375 -0.000192364 0.000032720 0.000240980 -0.000476242 0.001041385 0.000138248 -0.000056053 0.000281357 0.000491932 -0.000301630 0.000510965 0.000030565 0.000077410 0.000354967 0.001314790 0.000082028 -0.000035871 0.000150563 -0.000360271 0.000541527 0.000278003 -0.000027842 -0.000045383 -0.000188315 0.000029596 0.000037894 -0.000015571 0.000001354 -0.000027296 -0.000150000 -0.000073862 -0.000022847 -0.000000343 0.000066956 -0.000322401 -0.000076573 0.000018996 0.000010867 0.000007015 0.000124928 0.000042267 0.000007284 -0.000068730 0.000197685 -0.000313279 -0.000114238 0.000010640 0.000028185 -0.000008334 -0.000190398 0.000007110 0.000002720 0.000029102 -0.000144319 0.000186828 0.000053529 -0.000013582 0.000122152 -0.001123027 0.002464727 0.000610168 0.000030858 -0.000041170 0.001476476 0.000244095 -0.000513755 0.000022989 -0.000176445 0.001221054 -0.002726175 -0.000436220 0.000044654 0.168154876 -0.143404273 0.235789321 -0.000296760 0.000081109 0.028307565 -0.000660426 -0.000253927 -0.014681120 0.360672627 0.001104667 0.000277611 -0.009268583 0.025492269 0.057086715 -0.000024097 -0.000087241 -0.004118347 -0.000035015 -0.001370127 0.000014021 0.000031847 -0.000349559 0.000675351 0.000329550 0.000066179 -0.000074860 -0.001244461 -0.000057315 0.000722507 0.000433573 0.000817208 0.000501056 0.000281938 0.000310644 0.000597289 0.001104561 0.000651638 -0.000503487 -0.001352515 -0.000656219 -0.001386478 0.000288880 -0.000447605 -0.000427545 -0.000091981 -0.000835975 0.000064544 -0.000633409 -0.000693248 -0.000066927 -0.000173812 -0.000067466 -0.000074227 -0.000117988 -0.000162974 -0.000127872 -0.000073603 0.000183482 0.000213030 0.000007243 0.000019878 -0.000011280 0.000018838 0.000044899 0.000001015 -0.000013909 0.000062060 -0.000025697 0.000000592 -0.000003985 0.000019352 0.000070235 0.000032125 0.000062191 0.000060465 0.000162338 -0.000039962 0.000044251 0.000031076 0.000011439 -0.000016397 0.000028408 -0.000014894 0.000012908 -0.000013822 -0.000035524 -0.000003251 -0.000005746 -0.000013705 0.000000772 0.000003617 -0.000002366 0.000000442 -0.000001661 0.000001189 0.000008325 -0.000001453 0.000003485 0.000001088 -0.000003203 -0.000015709 -0.000005376 -0.000009261 -0.000012774 -0.000000545 -0.000013318 -0.000005315 -0.000014060 -0.000019649 -0.000009421 -0.000039808 0.000006449 -0.000027932 -0.000035384 -0.000006668 -0.000001453 -0.000009167 -0.000000208 -0.000010133 -0.000001307 0.000002603 0.000003256 0.000005687 0.000008554 0.000004211 0.000021414 0.000004555 0.000007412 0.000008247 -0.000003458 -0.000021113 -0.000001231 -0.000011443 -0.000007233 -0.000003121 -0.000010394 -0.000004952 -0.000002221 -0.000004544 -0.000000671 0.000000964 -0.000001249 0.000006325 0.000007893 0.000002991 0.000007974 -0.000002853 0.000000884 -0.000000528 -0.000005786 -0.000015407 0.000002079 -0.000003496 -0.000001688 0.000002556 -0.000006936 -0.000004809 -0.000003161 0.000003397 -0.000002938 -0.000015372 0.000002433 -0.000007434 -0.000007205 0.000003667 0.000008802 0.000003533 0.000005344 0.000010191 0.000000369 -0.000003537 -0.000001302 -0.000003452 -0.000003741 -0.000000591 0.000005797 0.000003730 0.000004762 0.000003222 0.000006142 0.000018306 0.000006565 0.000003186 0.000007273 0.000003792 0.000024316 -0.000000648 0.000011053 0.000014474 -0.000003282 -0.000003208 -0.000000749 0.000006520 0.000005596 0.000000428 0.000002054 0.000001873 0.000001042 0.000002080 0.000000337 -0.000001722 -0.000001249 -0.000002025 -0.000001557 -0.000002177 -0.000008850 -0.000001543 -0.000002071 -0.000003349 0.000000359 0.000001653 0.000003116 0.000002609 0.000004585 -0.000000472 -0.000000041 0.000000032 0.000000528 -0.000000867 -0.000001396 -0.000005507 0.000000433 -0.000005635 -0.000007526 0.000000780 0.000002504 0.000001242 0.000001643 0.000002756 -0.000000101 -0.000000756 -0.000001221 -0.000000311 -0.000000018 0.000000569 -0.000002691 -0.000000752 -0.000003322 -0.000002053 -0.000121305 -0.001794848 -0.000591158 -0.000062084 -0.000272616 0.001105266 0.000482861 0.000068177 -0.000118933 0.000049209 0.000704130 0.002468255 -0.000194558 -0.000136963 0.000343901 -0.000091259 -0.000285026 -0.000050930 0.000062900 -0.000011146 -0.000120479 -0.000312315 -0.000041662 0.000086674 -0.000005648 -0.000332758 -0.000230803 -0.000004013 0.000110602 -0.000092586 -0.000004949 0.000003571 0.000008208 0.000004414 0.000004168 -0.000001826 -0.000000260 0.000000659 0.000002333 0.000001031 -0.000001490 -0.000000102 0.000002416 0.000001342 0.000001057 -0.000023758 0.000352824 -0.000004598 0.000365812 0.000324601 0.000016831 -0.000043620 0.000001138 -0.000064589 -0.000052018 0.000009869 -0.000099674 0.000037173 -0.000122599 -0.000078646 0.000022387 -0.000170837 0.000004741 -0.000197366 -0.000164632 0.000003356 -0.000060027 0.000050670 -0.000106398 -0.000088021 -0.000028968 0.000366219 0.000013948 0.000371044 0.000307956 -0.000008311 0.000061445 0.000014390 0.000060410 0.000046731 0.000013943 -0.000218008 -0.000061273 -0.000177310 -0.000151983 0.000017586 -0.000188740 -0.000042627 -0.000184542 -0.000156116 0.000019155 -0.000045696 0.000003055 -0.000068235 -0.000036151 -0.000007146 0.000174775 0.000047484 0.000130699 0.000110056 -0.000010266 0.000031708 0.000018993 0.000051691 0.000039521 -0.000005721 0.000012696 0.000000123 0.000019175 0.000010478 0.000002338 -0.000028899 -0.000008855 -0.000024392 -0.000019211 -0.000000132 0.000000102 -0.000004203 -0.000003590 -0.000003761 -0.000005295 -0.000002069 -0.000006390 0.000008960 0.000001020 0.000000083 -0.000028700 -0.000008162 -0.000018595 -0.000015172 0.000002601 -0.000001194 -0.000003406 -0.000007190 -0.000004542 -0.000004391 0.000007540 -0.000000087 0.000012981 0.000006425 -0.000000091 -0.000023757 -0.000007906 -0.000014578 -0.000013356 0.000002824 -0.000007771 -0.000004541 -0.000012377 -0.000008720 -0.000016556 0.000078277 -0.000004984 0.000103410 0.000075919 -0.000019587 0.000138017 -0.000030497 0.000194115 0.000159101 0.000011992 -0.000063988 -0.000013558 -0.000082993 -0.000067087 0.000005981 -0.000037038 -0.000002124 -0.000044149 -0.000031771 0.000002288 -0.000018876 0.000005364 -0.000029095 -0.000024569 -0.000008663 0.000051088 0.000015146 0.000059163 0.000048531 0.000001858 -0.000001489 0.000000400 -0.000003945 -0.000001533 -0.000000973 0.000005276 0.000002922 0.000006593 0.000004428 0.000001716 0.000001156 0.000001235 -0.000002159 -0.000000389 0.000000170 0.000004633 0.000001723 0.000003274 0.000002899 0.000000720 0.000000088 0.000000394 -0.000001320 -0.000000553 -0.000000099 0.000004190 0.000000637 0.000003457 0.000002953 0.000000340 -0.000007256 -0.000003441 -0.000006045 -0.000005147 -0.000001296 0.000001736 -0.000000052 0.000002956 0.000001452 0.000000270 -0.000003690 -0.000000664 -0.000001973 -0.000001826 0.000002987 0.000009943 0.000005737 0.000000926 0.000004141 -0.000000333 0.000007799 0.000001787 0.000006076 0.000004125 -0.000001783 -0.000002621 0.000000047 0.000001963 0.000000564 0.000000271 0.000000096 0.000000540 -0.000000596 0.000000225 -0.000000304 0.000003515 -0.000000081 0.000002089 0.000000764 0.000000153 0.000002398 -0.000000917 0.000000569 -0.000000181 0.000000580 -0.000001706 -0.000000396 -0.000002311 -0.000001824 0.000000848 -0.000002921 -0.000000313 -0.000003414 -0.000002013 -0.000000317 -0.000005195 -0.000001333 -0.000003155 -0.000002894 0.000000143 0.000004860 0.000001498 0.000003154 0.000003019 0.000000443 0.000000015 -0.000000295 -0.000000551 0.000000213 0.000000091 -0.000005176 -0.000001269 -0.000003661 -0.000003189 -0.000000140 -0.000004399 -0.000002879 -0.000001698 -0.000002029 -0.000000749 0.000000929 -0.000000023 0.000001822 0.000000554 0.000000020 0.000002796 0.000001464 0.000002248 0.000002137 0.000000433 -0.000002215 0.000000209 -0.000002297 -0.000001129 -0.000000239 0.000001683 0.000001237 0.000001284 0.000000900 -0.000000396 0.000003836 0.000000481 0.000002287 0.000001228 -0.000001346 0.000008103 0.000001051 0.000008519 0.000006103 0.000000971 -0.000000093 -0.000000329 -0.000000573 0.000001833 0.000001282 -0.000007079 -0.000000299 -0.000009677 -0.000008202 -0.000000737 0.000001732 0.000000543 0.000003657 0.000003327 -0.000000207 0.000001905 -0.000001359 0.000001408 -0.000000243 0.000001056 -0.000007618 -0.000001620 -0.000009168 -0.000008204 0.000000503 0.000002430 -0.000001247 0.000004249 0.000006135 -0.000001007 0.000003690 -0.000001065 0.000006281 0.000004400 0.000000432 -0.000002980 0.000003464 -0.000005371 -0.000003205 0.000001947 0.000007466 -0.000001788 0.000007150 0.000003913 0.000005502 0.000025232 -0.000019115 0.000005906 -0.000002201 -0.000006535 0.000004607 -0.000006660 0.000004026 0.000004005 -0.000002799 0.000006100 0.000000873 -0.000009327 -0.000000791 0.000000734 -0.000009458 0.000026232 0.000020037 0.000032766 0.000016610 -0.000044610 0.000003544 0.000009993 0.000009957 -0.000005771 0.000005114 -0.000047346 -0.000026808 -0.000018614 -0.000008368 0.000014761 -0.000041117 -0.000020582 -0.000030303 -0.000011478 0.000000778 -0.000008514 -0.000012385 -0.000009187 0.000003939 -0.000025759 0.000014800 0.000010712 0.000022268 0.000007462 -0.000024016 0.000017575 0.000022657 0.000036032 -0.000002349 0.000020701 -0.000016097 0.000006671 0.000006377 0.000000413 0.000001946 -0.000000807 -0.000004000 -0.000004925 -0.000000236 0.000001605 0.000009586 -0.000007457 -0.000007739 -0.000001748 0.000007404 0.000019804 0.000001011 -0.000005629 0.000001032 -0.000005317 -0.000007512 0.000000201 0.000004009 -0.000000559 -0.000001809 -0.000002509 0.000006534 0.000010666 -0.000001177 0.000003591 0.000015887 -0.000002054 -0.000004580 -0.000003982 -0.000002689 0.000001810 0.000019538 0.000006205 0.000004346 0.000013395 -0.000018171 -0.000009407 -0.000003017 0.000006220 -0.000015231 0.000000239 0.000002105 -0.000004596 -0.000012729 0.000010479 0.000046650 0.000035488 0.000011131 -0.000006875 -0.000012656 -0.000037114 -0.000064026 -0.000066531 -0.000011326 -0.000004138 -0.000062429 -0.000027101 -0.000025429 -0.000021586 0.000054374 0.000056425 -0.000006724 -0.000076908 -0.000033482 0.000060208 0.000076176 -0.000046085 -0.000163324 -0.000049806 0.000021108 -0.000025405 -0.000025733 -0.000157644 0.000000013 0.000004471 0.000005088 0.000005990 0.000006300 -0.000000526 -0.000000983 0.000004850 -0.000001391 -0.000004653 -0.000000168 0.000002377 0.000003682 0.000003480 0.000002626 -0.000000365 0.000000716 0.000000479 0.000003030 0.000002646 0.000001062 0.000001375 -0.000000337 -0.000000180 0.000001550 -0.000001833 -0.000001152 0.000002777 0.000001439 0.000001597 -0.000002180 -0.000007846 -0.000004518 -0.000000015 -0.000002984 0.000000681 0.000000366 -0.000000038 -0.000000674 0.000000057 0.000002194 0.000004272 0.000000854 0.000000643 0.000001634 0.000001589 0.000004056 0.000002225 -0.000000611 0.000001301 0.000001794 0.000003081 0.000001014 -0.000000697 0.000000866 0.000004669 0.000008263 0.000002356 -0.000000835 0.000002421 -0.000002582 -0.000010781 -0.000009229 -0.000001777 -0.000005394 -0.000001371 -0.000002111 -0.000001251 0.000000598 -0.000000621 -0.000003275 -0.000002730 -0.000000066 0.000001998 -0.000000095 -0.000002619 -0.000000620 0.000003929 0.000002058 0.000001135 0.000002272 0.000000667 -0.000000238 -0.000002310 -0.000000813 0.000001122 -0.000001716 -0.000001342 -0.000000803 -0.000001219 0.000009464 0.000007261 -0.000003938 -0.000004363 -0.000000445 -0.000000374 -0.000002993 -0.000001920 -0.000001893 -0.000001817 -0.000006591 -0.000009942 -0.000003110 0.000000928 -0.000002876 -0.000000119 0.000000888 0.000000586 -0.000000070 0.000000309 -0.000000207 0.000000743 -0.000000206 0.000000988 0.000000275 0.000000724 -0.000000113 -0.000000958 -0.000000589 -0.000000430 0.000000525 0.000000238 0.000000330 -0.000000392 0.000000132 -0.000000295 0.000002154 0.000000728 0.000001958 0.000001173 0.000000226 0.000000849 0.000000337 0.000000179 0.000000432 0.000020020 0.000044164 0.000022928 -0.000003242 0.000015910 0.000001680 0.000012836 0.000008055 0.000006429 0.000007075 -0.000001407 -0.000016226 0.000004917 -0.000001388 -0.000002657 0.000005471 0.000006415 0.000000633 -0.000002311 0.000001145 -0.000002267 -0.000001427 0.000000950 0.000003078 0.000000818 -0.000000436 -0.000002778 -0.000000127 -0.000001450 -0.000001359 -0.000000975 -0.000000126 0.000001262 0.000000774 0.000000329 -0.000006668 -0.000006972 -0.000000049 0.000003789 -0.000000359 -0.000001421 -0.000000845 0.000001381 -0.000000611 -0.000000338 0.000002853 -0.000019282 -0.000018291 0.000002014 0.000015022 0.000003823 -0.000015862 -0.000030736 0.000010846 0.000026856 0.000033374 -0.000002941 -0.000000444 0.000013876 0.000117698 0.000021127 -0.000042229 -0.000086660 -0.000025393 0.000022741 0.000026340 -0.000026420 -0.000020992 0.000061106 0.000187770 0.000037131 -0.000024921 -0.000017797 0.000018135 0.000102885 -0.000008712 -0.000015727 -0.000010032 0.000002457 -0.000005914 -0.000000091 -0.000007706 -0.000006371 -0.000005607 -0.000005201 -0.000000992 0.000003140 -0.000006258 0.000000244 -0.000001020 -0.000010296 -0.000022607 -0.000008569 0.000002819 -0.000006944 -0.000000153 -0.000010391 -0.000004532 -0.000006476 -0.000005427 0.000004267 0.000017584 0.000001239 0.000001329 0.000004699 0.000000043 -0.000001745 -0.000003205 -0.000002173 -0.000002551 -0.000002911 0.000000759 0.000004656 0.000003813 0.000001806 -0.000000875 0.000006552 0.000001260 0.000000983 0.000000056 -0.000003411 0.000000340 0.000002485 0.000003831 0.000002971 -0.000001537 -0.000002511 0.000003940 0.000001574 0.000002212 0.000002908 -0.000002272 -0.000002379 -0.000002594 -0.000002004 -0.000004107 0.000001245 0.000001479 0.000002864 -0.000000685 0.000005946 0.000000589 -0.000003237 -0.000005493 0.000000629 0.000000080 0.000006371 0.000000971 -0.000001705 0.000000748 -0.000001057 -0.000001452 -0.000000257 -0.000000736 -0.000000899 -0.000000450 0.000000518 0.000003350 0.000000398 0.000001912 -0.000000590 0.000007114 0.000000417 -0.000000411 0.000000896 0.000002601 -0.000006184 -0.000002879 -0.000000227 -0.000001568 -0.000002502 0.000000805 0.000000595 0.000001270 0.000000029 0.000002284 -0.000004082 -0.000000719 0.000000360 0.000000214 0.000002308 -0.000001449 -0.000000345 -0.000000755 0.000000131 0.000001134 -0.000001293 -0.000000980 -0.000000412 -0.000000026 -0.000000855 -0.000002210 -0.000000213 0.000001326 -0.000000381 0.000004494 0.000001487 -0.000000979 -0.000003308 0.000000073 -0.000001822 -0.000002336 -0.000000920 0.000001265 -0.000001551 0.000000221 0.000004251 0.000001339 0.000000650 0.000001294 0.000000338 -0.000000233 0.000001434 -0.000000453 0.000001320 0.000001748 -0.000004498 -0.000001479 -0.000000292 -0.000000085 0.000001522 0.000005171 -0.000000421 -0.000000911 -0.000000377 -0.000001325 -0.000001291 0.000000059 0.000000996 0.000000085 -0.000002134 -0.000000941 0.000001339 0.000001259 0.000000750 -0.000001256 -0.000002780 -0.000000729 0.000000121 -0.000000987 -0.000000600 -0.000001129 0.000000316 0.000000260 -0.000000058 0.000000245 0.000000507 0.000000932 -0.000000244 0.000000396 -0.000000539 -0.000001781 -0.000000638 0.000000678 -0.000000432 -0.000001476 -0.000007595 -0.000005085 0.000001582 -0.000003510 -0.000004440 -0.000004006 0.000000463 0.000004287 0.000000956 -0.000002675 -0.000004211 -0.000001013 0.000002410 -0.000000647 0.000000197 -0.000001821 -0.000001237 -0.000000278 -0.000001030 0.000001979 0.000002198 0.000000829 -0.000001469 0.000000145 0.000001435 0.000000086 -0.000000583 -0.000001555 -0.000000637 0.000000126 0.000003495 0.000002366 -0.000000100 0.000001740 0.000003154 0.000001041 -0.000001024 -0.000003185 -0.000001076 0.000001158 0.000003364 0.000000992 -0.000001054 0.000000537 0.000000329 -0.000001028 -0.000000610 -0.000000257 -0.000000537 0.000000496 -0.000001183 -0.000001121 -0.000000454 -0.000000777 0.000000074 -0.000000030 -0.000000339 -0.000000043 -0.000000353 -0.000000335 -0.000002105 -0.000001357 0.000000566 -0.000000979 -0.000000552 -0.000000216 -0.000000093 0.000000583 -0.000000059 -0.000000135 -0.000002405 -0.000001058 0.000000260 -0.000000661 0.000000852 0.000001190 -0.000000052 -0.000000933 -0.000000075 0.000000178 -0.000000030 -0.000000368 -0.000000194 -0.000000283 0.000000320 -0.000000217 -0.000000250 -0.000000347 -0.000000087 0.000000906 0.000001256 0.000000307 -0.000001118 0.000000132 -0.000002892 -0.000000574 0.000001296 0.000002863 0.000001235 -0.000000678 0.000000408 0.000000391 0.000000805 0.000000412 0.000001564 -0.000000646 -0.000001602 -0.000001643 -0.000001242 0.000000916 0.000001201 0.000000249 -0.000000814 -0.000000017 0.000000842 0.000000576 -0.000000314 -0.000000724 -0.000000381 -0.000000590 -0.000000857 -0.000000279 0.000000695 -0.000000139 0.000000329 0.000001278 0.000000687 -0.000000274 0.000000396 -0.000000134 -0.000000203 0.000000072 0.000000006 0.000000040 0.000000403 0.000000616 0.000000130 -0.000000404 0.000000029 0.000000734 0.000001467 0.000000433 -0.000000835 0.000000264 0.000000410 0.000000326 0.000000137 -0.000000507 0.000000104 0.000000450 -0.000030409 0.000000652 -0.000045697 -0.000029818 -0.000005890 -0.000019456 0.000004271 -0.000006820 -0.000032254 -0.000003803 0.000012575 -0.000029830 0.000027496 -0.000007165 0.000006649 -0.000002886 -0.000032073 0.000013845 0.000007996 -0.000000709 -0.000001644 -0.000010529 0.000006625 0.000002182 -0.000005003 0.000001193 0.000039288 -0.000024911 -0.000001487 -0.000009155 0.000023361 -0.000012239 0.000018070 0.000006718 0.000004268 0.000003385 -0.000007102 -0.000001050 0.000007280 0.000004381 -0.000002286 -0.000001739 -0.000002839 -0.000002676 0.000012552 -0.000024704 0.000041330 -0.000031459 -0.000006920 -0.000011662 0.000015521 0.000048708 -0.000009667 0.000015622 0.000008914 -0.000020434 -0.000001017 -0.000006338 -0.000012554 -0.000002982 -0.000013092 0.000007395 -0.000021148 -0.000003117 -0.000009466 0.000011455 -0.000001971 0.000021534 0.000020922 0.000009665 0.000015722 -0.000027337 0.000014455 0.000004742 0.000002648 0.000017155 -0.000004549 0.000004454 0.000005271 0.000000259 -0.000014629 0.000005327 -0.000005632 -0.000003973 -0.000000956 -0.000000827 0.000002170 0.000002811 0.000000800 0.000000010 0.000000213 0.000001385 0.000002027 -0.000000147 -0.000000070 -0.000002304 -0.000008382 0.000004913 0.000001279 -0.000000950 0.000000286 -0.000001149 -0.000002634 0.000000212 0.000023376 0.000020106 0.000001673 -0.000012694 -0.000007128 0.000022485 0.000044533 -0.000007901 0.000001312 0.000003351 -0.000015709 -0.000030832 0.000003445 0.000000614 -0.000012195 0.039409400 0.028529228 0.161220904 -0.051669330 -0.140242976 0.249428536 -0.004570030 -0.000927051 -0.000868660 0.470345504 0.000187964 0.001668473 0.000123223 0.261168166 0.605304220 0.000001087 0.001435621 -0.000016384 -0.227611526 0.129658479 -0.000000697 0.000929122 0.001234222 -0.220155958 -0.108404366 0.002177639 -0.001162376 -0.000946555 -0.137778774 -0.170082808 0.000142285 -0.000527488 -0.000294570 0.152640897 0.038401048 -0.000998846 0.001189338 0.000501258 -0.013919822 -0.031579052 0.000863072 -0.000019977 -0.000897632 -0.004102445 -0.007226372 0.001062189 -0.000599164 -0.000097816 0.007514642 0.019064503 -0.000103869 0.000086158 -0.000111654 -0.006563545 0.006517342 -0.000236687 0.000366653 -0.000095562 0.003900371 0.014030821 0.000018164 -0.000155308 0.000038891 0.010247085 0.002802544 -0.000012517 -0.000001910 -0.000009534 0.000080714 0.000209454 -0.000000628 0.000005659 0.000000202 -0.000055304 0.000519384 -0.000046056 0.000009561 -0.000014155 -0.000174280 -0.000273765 0.000034526 0.000014076 -0.000036343 0.001190968 0.000332202 0.000046018 0.000038245 -0.000065821 0.000539635 -0.000815969 0.000024704 -0.000021480 0.000023076 -0.002094058 -0.002775602 0.000001623 -0.000026208 -0.000031171 0.000438820 0.000098210 0.000007144 -0.000040691 0.000018853 -0.001751205 -0.002323569 -0.000088464 0.000143706 -0.000073484 -0.001892957 -0.001784538 -0.000014394 0.000012954 0.000002776 0.000331857 0.000071100 -0.000023420 0.000032194 -0.000010213 -0.000278842 0.000094181 -0.000005356 0.000012388 0.000001997 0.000198961 0.001120653 -0.000032425 -0.000001568 -0.000007734 0.000795063 0.000275747 -0.000037380 0.000005145 0.000029376 0.000266502 0.001085064 -0.000010418 -0.000005134 -0.000022206 -0.000101024 -0.000439585 0.000040238 -0.000009039 0.000074765 -0.000758134 -0.000207505 -0.000033275 0.000040246 0.000030121 0.000317354 0.000490027 0.000050841 -0.000009859 -0.000008526 -0.000108898 -0.000263260 0.000017008 -0.000012776 0.000009064 -0.000837783 -0.000605761 0.000010202 -0.000034257 0.000007009 -0.000036598 -0.000190507 0.000002471 0.000006085 0.000008942 0.000292271 0.000262005 0.000010376 0.000000430 0.000005969 -0.000255378 -0.000107048 -0.000008532 0.000002961 -0.000002006 0.000026714 0.000007908 -0.000013564 0.000020342 -0.000005625 0.000010881 0.000159684 0.000018942 0.000000584 0.000015503 -0.000159757 -0.000074871 0.000002881 -0.000000667 -0.000000446 0.000065891 -0.000042826 -0.000011455 0.000014327 -0.000009575 -0.000058290 -0.000208304 0.000007750 -0.000000369 0.000005012 -0.000150423 -0.000082551 -0.000007427 0.000002350 0.000002117 0.000059414 0.000085033 -0.000008455 0.000007279 -0.000000133 0.000004238 -0.000006053 -0.000212372 -0.000658450 -0.000066178 -0.000527354 -0.000720867 -0.000196059 -0.001429069 -0.000211192 -0.004106386 0.005240786 -0.000089412 0.001244128 0.000276699 -0.003693705 0.001311936 0.000079545 0.000155406 0.000030495 -0.001233499 0.000370520 0.000058301 0.000429530 0.000059368 0.000897530 -0.000517747 0.000103826 0.000575056 0.000047700 0.000373807 -0.003011901 0.000023978 0.000000515 0.000010358 -0.000419992 -0.000217064 0.000003766 -0.000000221 0.000001072 0.000022701 0.000067012 0.000007105 0.000001791 0.000003559 -0.000095668 -0.000049889 0.000279223 -0.000318016 0.000055033 -0.065222520 -0.011604405 -0.000137777 0.000080275 -0.000068196 0.010258477 0.002893679 -0.000101146 0.000122171 -0.000019677 0.015336905 0.005082372 -0.000157233 0.000258870 -0.000110005 0.019439432 0.005772748 0.000048092 0.000067444 0.000034117 0.008124335 0.001658844 0.000442425 -0.000430868 0.000167030 -0.040957431 -0.013242533 0.000094875 -0.000084846 0.000039608 -0.004035733 -0.002002528 -0.000366938 0.000235306 -0.000159856 0.018265674 0.007311435 -0.000339415 0.000210639 -0.000163488 0.018592358 0.006575425 -0.000067141 0.000098951 -0.000007405 0.003159531 0.000848781 0.000270480 -0.000201963 0.000106519 -0.013083553 -0.004997896 0.000108016 -0.000041706 0.000056941 -0.004021518 -0.001183721 0.000023164 -0.000025859 0.000005668 -0.000982557 -0.000295423 -0.000051672 0.000033990 -0.000021098 0.002121313 0.000729008 -0.000013581 -0.000000225 -0.000009157 0.000258607 0.000101716 -0.000008330 -0.000013013 -0.000009895 0.000129442 0.000169386 -0.000041119 0.000035834 -0.000012202 0.001573384 0.000614148 -0.000016223 0.000004469 -0.000008343 0.000358336 0.000092532 0.000012503 -0.000019005 0.000000940 -0.000576877 -0.000148672 -0.000037261 0.000024867 -0.000015256 0.001698902 0.000690138 -0.000023326 0.000013415 -0.000010116 0.000813338 0.000276899 0.000096314 -0.000122156 0.000021464 -0.008386572 -0.002460779 0.000067214 -0.000162629 0.000030169 -0.016328533 -0.004259532 -0.000133306 0.000100864 -0.000057369 0.007561548 0.001996971 -0.000067963 0.000065509 -0.000028862 0.003250387 0.001130658 -0.000029996 0.000049385 -0.000009053 0.001926124 0.000562134 0.000118410 -0.000076783 0.000054131 -0.004930099 -0.001938328 -0.000005225 0.000004548 -0.000001568 0.000069040 0.000078413 0.000014969 -0.000008010 0.000006527 -0.000321817 -0.000091635 0.000000173 0.000000868 0.000000396 -0.000033717 -0.000103131 0.000008708 -0.000004661 0.000003735 -0.000253627 -0.000099116 -0.000000504 0.000001254 -0.000000127 0.000086083 0.000026654 0.000005656 -0.000004862 0.000002069 -0.000361410 -0.000165050 -0.000015129 0.000008606 -0.000006903 0.000585135 0.000201192 0.000003792 -0.000003257 0.000001306 -0.000180692 -0.000062356 -0.000005066 0.000003004 -0.000002131 0.000296350 0.000126983 0.000017998 -0.000005205 0.000009454 -0.000640120 -0.000374317 0.000010609 -0.000012022 0.000001917 -0.000235289 -0.000046763 0.000003359 0.000002716 0.000002798 -0.000019626 0.000047920 0.000002135 0.000002866 0.000002486 -0.000096853 -0.000038027 0.000000993 -0.000007158 -0.000003203 -0.000033472 -0.000032277 -0.000003063 -0.000005412 -0.000004444 0.000079843 0.000013529 -0.000004370 0.000002205 -0.000002609 0.000292907 0.000111892 -0.000004405 0.000005254 -0.000000758 0.000204479 0.000068335 -0.000007727 0.000005127 -0.000003481 0.000295756 0.000092350 0.000007424 -0.000005080 0.000003074 -0.000338509 -0.000134421 -0.000001033 0.000000657 0.000000211 -0.000017927 -0.000008118 -0.000007743 0.000005652 -0.000003261 0.000385525 0.000151002 -0.000009124 0.000003226 -0.000004474 0.000318728 0.000135169 0.000001967 -0.000002405 0.000000044 -0.000079915 -0.000020279 0.000005846 -0.000003072 0.000002661 -0.000222356 -0.000091938 -0.000001307 0.000004958 0.000001323 0.000072860 0.000024316 0.000004384 -0.000001742 0.000001745 -0.000131471 -0.000048883 0.000003297 -0.000005814 -0.000000515 -0.000157402 -0.000066367 0.000015294 -0.000015529 0.000003146 -0.000642181 -0.000203763 -0.000003466 -0.000000294 0.000000468 -0.000093965 0.000009908 -0.000015884 0.000011633 -0.000008378 0.000854555 0.000303074 0.000009532 -0.000001785 0.000008156 -0.000643026 -0.000054218 -0.000000166 -0.000003309 -0.000003881 -0.000155817 -0.000024723 -0.000017134 0.000010888 -0.000009556 0.000893017 0.000297371 -0.000000379 -0.000006279 0.000002624 -0.000344619 -0.000073012 0.000004652 -0.000007251 0.000001896 -0.000398737 -0.000109930 -0.000000450 0.000005315 0.000002527 0.000361317 0.000101852 -0.000009467 -0.000020409 -0.000014413 0.000525136 0.000125634 -0.000053192 -0.000013368 -0.000005827 0.000843750 0.000021518 -0.000028983 0.000004072 0.000086725 0.000252899 0.000419614 0.000013873 0.000009969 0.000039171 -0.001095042 -0.000483165 0.000143425 0.000024543 -0.000028827 0.000855896 -0.000035555 0.000200023 0.000098371 -0.000026624 -0.000874625 -0.000246703 -0.000044826 -0.000137847 -0.000072571 -0.002096740 0.000587196 -0.000271344 -0.000200050 0.000155835 -0.000165584 -0.000242784 -0.000088369 -0.000100307 0.000112318 -0.001496410 0.000402752 0.000163546 0.000049112 0.000146866 -0.001426656 0.000150232 0.000130054 -0.000027501 0.000179994 0.000728746 0.000342107 -0.000119199 -0.000128037 0.000031812 0.000405235 0.000096654 -0.000007253 -0.000012247 -0.000023605 0.000164283 -0.000042673 -0.000000089 -0.000027839 -0.000115399 0.000214635 -0.000432309 0.000002165 0.000004732 -0.000121874 0.000435457 -0.000047171 0.000003541 0.000009215 0.000062439 0.000172036 0.000110615 0.000033924 0.000010864 0.000076321 -0.000160857 0.000239496 0.000022026 0.000000502 -0.000105914 0.000059961 -0.000257020 0.000023493 0.000031879 0.000002855 0.000248701 0.000125249 -0.000001224 0.000002163 0.000019174 -0.000019064 -0.000051124 -0.000016810 -0.000005558 -0.000013879 0.000086503 -0.000052149 -0.000819007 -0.000375499 -0.000148062 0.000666017 -0.000164902 -0.000378656 0.000077688 -0.000059641 -0.000190617 -0.000117336 -0.000062682 0.000035054 0.000074911 0.000431656 -0.000125290 -0.000690670 -0.000152469 -0.000893619 -0.000835903 -0.000912922 -0.001085893 -0.000335615 -0.001499963 -0.001598226 -0.001107114 -0.000961472 -0.000373098 -0.001523187 0.003200281 -0.000586215 0.000019407 -0.000007573 0.000011464 -0.000132521 -0.000042073 -0.000005586 0.000010218 -0.000036631 -0.000008838 -0.000021651 0.000014478 0.000001994 -0.000008422 -0.000054730 -0.000026508 0.000010007 -0.000000468 0.000008607 -0.000049634 0.000042460 0.000006941 -0.000000637 0.000010096 -0.000035100 -0.000020038 0.000009951 0.000004779 -0.000000426 -0.000036631 0.000065229 -0.000011899 0.000002015 -0.000005224 0.000262760 0.000134457 -0.000000320 0.000001007 0.000000182 0.000016295 0.000010725 0.000003332 -0.000003514 0.000001054 -0.000094507 -0.000012409 0.000005712 -0.000001121 0.000002708 -0.000162448 -0.000094730 0.000002348 -0.000001207 0.000001326 -0.000077456 -0.000043536 0.000005993 -0.000005102 0.000002784 -0.000210064 -0.000099268 -0.000024704 0.000002516 -0.000011617 0.000524729 0.000275193 -0.000003030 0.000000543 -0.000001417 0.000065266 0.000045376 0.000000986 0.000001837 0.000000384 0.000019563 0.000013542 0.000010323 0.000002347 0.000004920 -0.000182736 -0.000123725 -0.000002595 0.000001231 -0.000000675 0.000035088 -0.000016271 -0.000004380 0.000000881 -0.000001925 0.000124111 0.000049828 -0.000011730 -0.000006388 -0.000005095 0.000123215 0.000066441 -0.000006221 0.000002862 -0.000002578 0.000130930 0.000048450 -0.000007160 0.000004657 -0.000003665 0.000189138 0.000094141 0.000001548 0.000000371 0.000000632 -0.000026591 -0.000018416 -0.000000170 -0.000002011 -0.000000780 0.000001578 0.000016017 -0.000002859 -0.000000034 -0.000001209 0.000047445 0.000021955 0.000000608 0.000000154 0.000000611 -0.000018065 -0.000009231 0.000003236 -0.000003485 0.000000635 -0.000101622 -0.000030189 0.000000908 -0.000000359 0.000000493 -0.000028102 -0.000010041 0.000056363 -0.000015828 0.000028509 -0.001591265 -0.000845394 0.000025006 -0.000010419 0.000010664 -0.000654822 -0.000270449 0.000006631 0.000019593 0.000007225 0.000313288 0.000080925 0.000000135 -0.000003329 0.000000466 -0.000068877 -0.000037823 0.000004528 -0.000001421 0.000001643 -0.000068055 -0.000012288 -0.000002915 0.000003137 -0.000000903 0.000087802 0.000017361 0.000003334 0.000001448 0.000001554 -0.000033847 -0.000023970 0.000002242 0.000002592 0.000000367 0.000034610 0.000049481 0.000002463 0.000001434 0.000001521 -0.000070344 -0.000077213 0.000081548 -0.000123645 0.000130090 0.000819033 0.000229263 0.000190782 0.000110089 0.000227517 0.000634807 0.000308138 0.000964918 0.000239743 0.000963672 -0.002103574 0.000179220 0.000254897 0.000648611 0.000385687 0.000158707 0.000609386 0.001167517 -0.000365321 0.001581956 0.000068028 0.000930534 0.000114920 0.001081096 -0.000964628 -0.000946216 0.000125715 -0.000022454 0.000002427 -0.000012332 0.000551535 0.000312593 -0.000019582 0.000007246 -0.000008720 0.000483269 0.000195896 -0.000012663 -0.000008343 -0.000008203 0.000061776 0.000074927 -0.000021282 0.000009660 -0.000010667 0.000710268 0.000371521 -0.000016617 0.000011735 -0.000005607 0.000519556 0.000191888 0.000007732 -0.000015681 0.000001091 -0.000496594 -0.000204246 -0.000008931 -0.000000323 -0.000001814 0.000021502 -0.000052029 0.000005420 0.000000008 0.000000837 -0.000028816 0.000022610 -0.000008194 -0.000006297 -0.000008377 0.000050290 0.000035681 0.000011608 0.000002151 0.000004724 -0.000003202 0.000126460 0.000014114 0.000004461 0.000006163 -0.000115016 -0.000010870 -0.000005235 0.000001743 -0.000001511 0.000009745 -0.000091072 -0.000009029 -0.000005845 -0.000006242 0.000079714 0.000044119 0.000008821 0.000007052 0.000006992 -0.000080774 -0.000046900 0.000001524 -0.000000065 0.000001471 -0.000050509 -0.000027821 -0.000000413 0.000001011 0.000000152 -0.000024182 -0.000038626 0.000011117 0.000004058 0.000005656 -0.000086634 -0.000014943 -0.000002958 -0.000002868 -0.000001251 0.000018880 0.000029505 -0.000003157 0.000000312 -0.000001070 0.000035373 -0.000005785 -0.000001575 -0.000001811 -0.000001212 0.000015314 0.000019763 0.000002665 0.000001856 0.000000897 0.000003365 0.000003427 0.000003072 0.000002559 0.000001673 -0.000014807 -0.000016244 0.000000970 0.000001057 0.000000630 -0.000000660 -0.000000208 -0.000001473 -0.000000881 -0.000001171 0.000025395 0.000015542 0.000002139 0.000002756 0.000002689 -0.000051817 -0.000064796 -0.000009200 -0.000003652 -0.000005119 0.000092580 0.000029931 0.000002298 -0.000001904 0.000000616 -0.000022145 0.000028165 0.000008627 0.000003731 0.000004522 -0.000068220 -0.000012015 0.000004141 0.000003376 0.000002400 -0.000008466 0.000002693 -0.000007654 -0.000004705 -0.000003750 0.000031181 -0.000001933 0.000000652 -0.000000072 0.000000040 0.000007765 0.000018487 0.000005152 0.000002003 0.000002008 -0.000028080 0.000007695 -0.000002649 0.000000470 -0.000001096 0.000029851 -0.000005208 0.000001782 0.000001239 0.000000778 -0.000012027 -0.000009613 0.000002916 0.000001650 0.000001335 -0.000022154 -0.000014254 -0.000001551 -0.000000394 -0.000000959 0.000025021 0.000012503 -0.000015960 -0.000004177 -0.000007989 0.000190980 0.000073139 0.000004739 0.000001072 0.000000714 0.000086235 0.000146320 -0.000002386 -0.000000900 -0.000001795 0.000067746 0.000062116 -0.000003560 -0.000000723 -0.000001642 0.000035622 0.000003288 0.000001781 0.000000496 0.000001149 -0.000072687 -0.000074222 -0.000001872 0.000000638 -0.000000484 0.000011367 -0.000021045 0.000007609 0.000001983 0.000003530 -0.000086435 -0.000028641 -0.000003963 0.000000285 -0.000000740 -0.000015117 -0.000071264 0.000001877 -0.000000025 0.000001052 -0.000052099 -0.000037494 -0.000002258 -0.000000137 -0.000001037 0.000030277 0.000005375 -0.000003163 0.000000179 -0.000001391 0.000037062 0.000001986 -0.000001631 -0.000000656 -0.000000928 0.000017298 0.000004884 -0.000004491 -0.000001492 -0.000002363 0.000054135 0.000022464 -0.000000908 -0.000000951 -0.000000600 0.000011363 0.000012882 -0.000002667 -0.000000174 -0.000001193 0.000036515 0.000011753 -0.000000475 0.000000437 0.000000005 -0.000008257 -0.000018979 -0.000001095 -0.000000380 -0.000000481 0.000003550 -0.000004504 -0.000000369 0.000000508 0.000000019 0.000004611 -0.000004209 0.000000201 0.000000700 0.000000530 -0.000012205 -0.000019676 0.000005146 -0.000000070 0.000001513 -0.000019383 0.000043844 0.000001360 -0.000000482 0.000000292 -0.000007725 0.000013760 -0.000004930 0.000000072 -0.000001855 0.000036403 -0.000019911 0.000000364 -0.000000092 0.000000414 -0.000039331 -0.000042945 -0.000001336 -0.000000582 -0.000000525 -0.000011326 -0.000024715 -0.000000452 -0.000000737 -0.000000445 0.000008298 0.000012518 0.000001683 0.000000244 0.000000839 -0.000032227 -0.000020830 0.000000262 0.000000424 0.000000215 -0.000000187 -0.000001589 -0.000000014 0.000000180 0.000000083 -0.000005724 -0.000009358 0.000000982 0.000000726 0.000000698 -0.000019015 -0.000017570 0.000000366 0.000000705 0.000000425 -0.000004180 -0.000008154 0.000007019 -0.000033889 0.000002619 0.003329578 0.001345693 0.000045549 0.000005415 0.000061144 0.001261245 0.000160977 0.000108081 0.000036115 0.000038996 0.004257654 0.001699587 -0.000141215 0.000074829 -0.000120687 -0.000461023 0.000287885 -0.000060547 0.000035596 -0.000028948 -0.000346995 0.000161100 0.000044795 -0.000002904 0.000050541 0.000040193 0.000121536 0.000061655 -0.000015376 0.000034590 0.000715131 0.000095335 -0.000091986 0.000033644 -0.000065896 -0.000181090 0.000055477 -0.000032291 -0.000015129 -0.000022413 -0.000804252 -0.000390505 0.000147400 -0.000031743 0.000088353 0.000630528 -0.000059118 0.000069949 -0.000059612 0.000074375 -0.000577335 -0.000580456 -0.000111963 0.000025067 -0.000075561 -0.001756593 -0.000839880 -0.000021922 -0.000071777 -0.000004421 -0.000427779 0.002713582 -0.000029407 0.000017904 -0.000023797 -0.006048954 0.000166328 -0.000011213 -0.000058224 -0.000021699 0.003212039 -0.000151396 0.000003558 -0.000012043 0.000006117 0.000797515 0.000964725 -0.000013020 0.000034731 -0.000002022 -0.000030237 0.001021549 0.000006946 -0.000005470 0.000006763 -0.000560757 -0.000702600 0.000007048 0.000017716 0.000004015 -0.000418197 -0.000202691 -0.000023338 -0.000002486 -0.000018012 0.000536038 0.000229222 -0.000007362 -0.000001310 -0.000000795 0.000187073 -0.000002315 0.000010037 -0.000058494 0.000024287 -0.001228246 0.002779809 0.000001368 0.000015465 -0.000006063 0.001797473 -0.000219572 0.000006498 0.000059429 0.000001067 -0.001513897 -0.000557432 0.577665822 0.130585503 0.327311885 0.048572153 0.260302499 0.603479813 -0.204642068 -0.180765053 0.069954000 0.593925374 -0.001974801 -0.063530404 -0.082202779 -0.015918822 0.083440652 -0.002640876 -0.099280009 -0.295094799 -0.071157171 0.095893050 0.009423714 -0.014083888 -0.074242044 -0.073737205 0.017690673 0.038387282 -0.062621986 -0.015611334 -0.000354880 0.002410181 0.010138209 -0.023431637 -0.111126541 -0.033482375 0.001344409 -0.031398539 0.017412010 -0.049039324 -0.233463534 0.000265184 0.000372239 -0.001138235 -0.000376922 -0.000357789 0.000087381 0.001040555 -0.000376201 -0.002422950 -0.000045397 -0.000014925 -0.000488682 0.000581019 0.000781508 0.001089221 -0.000087485 -0.001185566 0.004156880 -0.000482743 0.007541524 -0.000433478 -0.005091261 0.004816839 0.008035139 0.003524935 0.000194516 0.000103993 0.011424010 0.022627738 -0.032893185 0.000255737 0.000721665 0.001888748 0.001563186 -0.003556278 0.001636934 0.003171172 -0.000775156 0.001355546 -0.015187348 -0.000036673 0.001927441 -0.008350011 -0.033102839 -0.018138854 0.000754912 -0.000762723 0.005017687 -0.002231532 -0.000094259 -0.000141547 0.000965108 -0.002979327 -0.005577670 -0.002225769 0.000065369 0.000546389 0.000216388 -0.002987759 0.004388435 0.000011322 -0.001716506 0.004913982 -0.001833065 0.001155950 0.000034647 -0.000055885 -0.002657668 -0.002818169 0.005159864 0.000133879 -0.002199457 0.002786150 0.003662980 0.003445819 -0.000019363 0.001027826 -0.002436829 0.000471749 -0.000900909 0.000205974 0.000166707 0.000700511 -0.000030806 -0.002215649 -0.000087672 -0.000064042 0.000068844 0.002525029 0.001024697 0.000016856 0.000676602 -0.002070915 0.000607795 -0.000125557 -0.000124516 0.000140959 0.000362042 0.000243065 0.000385774 -0.000008282 -0.000361183 -0.000357140 0.000077319 0.000941967 0.000031411 0.000093851 0.000445633 -0.000047259 0.000130822 -0.000132435 -0.000083905 -0.000021239 -0.000123629 0.000297387 0.000027947 -0.000060034 -0.000208057 -0.001634792 0.000378541 -0.000017155 0.000015501 0.000478305 -0.000158652 -0.000160900 -0.000016313 -0.000022052 -0.000024868 0.000342750 -0.000354714 -0.000005215 -0.000419449 0.000882184 0.001095727 0.000007931 -0.000056604 0.000206619 -0.000742392 0.000187587 -0.000045333 0.000005348 -0.000053948 0.000225366 -0.000012118 -0.000012643 -0.000009994 -0.000076059 0.000084547 -0.000060389 0.000149965 -0.000016495 -0.003107510 -0.002757192 -0.000024575 0.000358742 0.000126419 0.003499268 0.008253209 0.001161336 -0.001422362 -0.000054759 0.006780143 0.002230156 0.001000241 -0.000302930 0.000049366 -0.000583085 0.000422489 -0.000091388 0.000478690 -0.000030738 -0.002010800 -0.003662328 -0.000041055 0.001381629 0.000198939 -0.002584922 -0.001286233 -0.001068199 -0.000095714 -0.000357444 0.000123841 0.000657109 -0.000072751 -0.000033449 -0.000045460 0.000005676 -0.000019896 0.000000447 0.000007503 0.000005289 0.000002242 0.000169085 -0.000017376 0.000021781 -0.000012493 0.019705348 0.090198498 -0.026322349 0.034689658 -0.011863575 -0.001622343 -0.025972477 -0.011825922 -0.013455405 0.010362243 -0.004470056 -0.014184517 -0.000673411 -0.011475164 0.001036843 -0.010518058 -0.050864161 0.011695387 -0.005406427 0.003269507 -0.003457518 -0.012361769 0.001727678 -0.003448131 0.005162129 0.015413411 0.074026932 -0.014067174 0.018822291 -0.007585352 0.003359594 0.006398713 -0.000460719 -0.003594605 -0.000639931 -0.007428664 -0.033258973 0.004968412 -0.006478136 0.002960516 -0.006224742 -0.033834687 0.004892256 -0.009910399 0.003621916 -0.001765776 -0.005359427 0.000906230 0.000107258 0.000496067 0.005574871 0.022929397 -0.003438116 0.002988388 -0.001991046 0.001078344 0.007288897 -0.001063925 0.001902516 -0.000718836 0.000483006 0.001762911 -0.000261152 0.000168881 -0.000162945 -0.000803499 -0.003614883 0.000527295 -0.000501201 0.000312412 -0.000022339 -0.000596711 0.000065577 -0.000223590 0.000057774 0.000091875 -0.000227638 0.000006335 -0.000161821 0.000006682 -0.000769197 -0.002621304 0.000402773 0.000013778 0.000203602 -0.000044934 -0.000682045 0.000074453 -0.000175281 0.000065113 0.000335557 0.000995711 -0.000167280 0.000017886 -0.000075613 -0.000715094 -0.003030511 0.000447218 -0.000405035 0.000233673 -0.000287443 -0.001507556 0.000187461 -0.000243822 0.000140432 0.003155788 0.013409803 -0.005899439 0.003450697 0.000312166 0.006116036 0.030886512 -0.009327690 0.008606638 -0.003454260 -0.001948964 -0.013960409 0.004377487 -0.004826412 0.000236139 -0.001320307 -0.005019187 0.000726515 -0.000926482 0.000306203 -0.000664383 -0.003382733 0.000845107 -0.000970982 -0.000098528 0.001510203 0.009230145 -0.001796776 0.002115700 -0.000039721 -0.000096802 -0.000303409 -0.000040504 0.000010656 0.000042724 0.000098560 0.000610645 -0.000001010 0.000030169 -0.000060892 0.000057673 0.000134874 0.000012263 -0.000027598 -0.000008042 0.000101903 0.000456386 -0.000039108 0.000037095 -0.000045641 -0.000035735 -0.000158841 0.000033746 -0.000045683 0.000014436 0.000188171 0.000661849 -0.000128629 0.000111465 -0.000059160 -0.000198407 -0.001025247 0.000140862 -0.000173372 0.000083919 0.000070879 0.000325169 -0.000049579 0.000061066 -0.000028642 -0.000116452 -0.000535806 0.000082102 -0.000116414 0.000043398 0.000176862 0.001075300 -0.000120418 0.000045254 -0.000089624 0.000157793 0.000311390 -0.000067006 -0.000175280 -0.000022783 -0.000067070 0.000086552 -0.000023555 0.000142687 -0.000009658 -0.000005500 0.000197747 -0.000062259 0.000121071 -0.000017221 0.000117329 -0.000035883 0.000025203 -0.000225139 0.000007521 0.000074763 -0.000223413 0.000053660 -0.000219308 0.000019019 -0.000090225 -0.000562421 0.000087762 -0.000161102 0.000049346 -0.000101335 -0.000360339 0.000051641 -0.000016532 0.000030581 -0.000111745 -0.000522409 0.000097440 -0.000075107 0.000039677 0.000143911 0.000609102 -0.000090087 0.000068748 -0.000053334 -0.000000883 0.000051089 -0.000008822 0.000022491 -0.000013859 -0.000159595 -0.000699182 0.000100564 -0.000099613 0.000060669 -0.000105359 -0.000555773 0.000080054 -0.000123681 0.000026554 0.000043197 0.000136348 -0.000025976 0.000014696 -0.000003628 0.000082803 0.000397107 -0.000050785 0.000054055 -0.000034234 -0.000084673 -0.000083184 0.000014474 0.000088812 0.000005218 0.000047908 0.000221080 -0.000035551 0.000042059 -0.000010093 0.000120049 0.000213388 -0.000033717 -0.000064732 -0.000005734 0.000189232 0.001250242 -0.000339871 0.000395670 0.000083138 0.000034008 0.000164861 -0.000133778 0.000101626 0.000016308 -0.000237083 -0.001627239 0.000395786 -0.000459241 -0.000059539 -0.000017601 0.001483584 -0.000360725 0.001072804 -0.000096709 0.000053908 0.000065862 -0.000038538 0.000142002 0.000010571 -0.000262898 -0.001524694 0.000295040 -0.000506036 0.000063646 0.000128024 0.000696458 -0.000210465 0.000138663 -0.000055840 0.000154695 0.000731913 -0.000155531 0.000137882 -0.000054180 -0.000116885 -0.000702579 0.000161493 -0.000205854 0.000042550 0.000151770 -0.000573746 0.000036935 0.000008553 0.000034329 -0.000104159 -0.001096997 0.000029586 0.000215560 0.000030847 -0.000289877 -0.000035391 -0.000093989 0.000387497 0.000013576 -0.000060096 0.000586663 0.000024106 -0.000219395 -0.000006268 0.000518214 -0.000118545 -0.000153195 0.000290138 0.000031847 -0.000096756 0.000665286 -0.000030378 -0.000426685 -0.000013622 -0.000830618 -0.000224251 0.000120276 -0.000342122 0.000031392 -0.000173144 0.000169633 -0.000004465 -0.000133116 -0.000055194 -0.000454546 0.000666810 -0.000063656 -0.000025863 0.000019172 -0.000517802 0.000636629 0.000105044 -0.000187239 -0.000002888 0.000335888 -0.000046305 -0.000293900 0.000420605 0.000032558 -0.000534224 -0.001047115 0.000071245 0.000528394 0.000002210 0.000152115 -0.000136153 0.000069144 0.000079924 -0.000004874 0.000407428 -0.000223394 0.000180181 -0.000420116 -0.000017921 0.000315762 -0.000417382 0.000177056 -0.000011367 -0.000019686 -0.000140973 -0.000045872 -0.000105772 0.000276013 0.000009926 -0.000080874 0.000007576 -0.000096157 -0.000128008 0.000033713 0.000331003 0.000024468 0.000167895 -0.000252546 -0.000008096 -0.000236305 -0.000351577 -0.000039376 0.000198938 0.000022183 -0.000103218 -0.000042698 -0.000026281 0.000008851 -0.000001104 -0.000029876 -0.000058035 0.000004687 -0.000039743 -0.000005767 -0.000348192 -0.000678715 -0.000000869 0.000281484 -0.000023210 0.000001472 0.000498946 0.000033388 -0.000171283 -0.000021564 -0.000475456 -0.000180486 -0.000158528 0.000134443 0.000035382 -0.000160848 -0.000059982 0.001568184 -0.001149230 -0.000337964 -0.000995250 0.000975315 0.001930920 -0.000483410 -0.000572724 -0.001974871 -0.005206412 0.002468575 0.002420171 -0.000562072 0.000184811 0.000082371 -0.000004836 -0.000378937 0.000006990 -0.000037175 0.000011835 0.000046069 0.000052381 -0.000016011 0.000084487 0.000027894 0.000030973 -0.000161505 0.000000140 0.000058011 0.000048638 -0.000002600 -0.000092929 0.000008075 0.000022354 0.000036694 -0.000009846 -0.000041100 0.000001980 0.000017803 0.000082635 -0.000007746 0.000005190 0.000002187 -0.000105133 -0.000409355 0.000037598 0.000036961 0.000026538 -0.000012801 -0.000022968 -0.000001155 0.000013869 0.000002293 0.000063096 0.000158505 -0.000021247 -0.000001506 -0.000008730 0.000061097 0.000252831 -0.000024401 -0.000018203 -0.000017885 0.000031087 0.000123230 -0.000010537 -0.000006872 -0.000008671 0.000102404 0.000333205 -0.000031386 -0.000023799 -0.000022869 -0.000163814 -0.000849681 0.000084982 0.000009370 0.000059366 -0.000025353 -0.000095482 0.000006935 0.000022036 0.000005881 -0.000033152 -0.000016548 0.000001029 0.000026735 -0.000000534 0.000020099 0.000304338 -0.000027815 0.000012690 -0.000024723 -0.000022078 -0.000074524 0.000013662 -0.000013955 0.000004663 -0.000044432 -0.000192296 0.000034755 -0.000012693 0.000012685 0.000012113 -0.000206902 0.000033658 -0.000038345 0.000015288 -0.000052734 -0.000220171 0.000020305 0.000003586 0.000015261 -0.000081038 -0.000311605 0.000021206 0.000017794 0.000021327 0.000009198 0.000035628 -0.000002341 -0.000012254 -0.000002078 0.000021717 -0.000008577 0.000003269 -0.000022105 0.000001854 -0.000014701 -0.000076034 0.000007896 0.000002820 0.000005082 0.000000969 0.000035415 -0.000005811 0.000014334 -0.000002559 0.000060232 0.000164061 -0.000018615 -0.000015508 -0.000011314 0.000009170 0.000050516 -0.000007431 0.000008530 -0.000003727 0.000574912 0.002580587 -0.000271743 0.000009024 -0.000181471 0.000245276 0.001116176 -0.000114341 0.000048357 -0.000082504 -0.000337248 -0.000376087 0.000078537 0.000197307 0.000022519 0.000047044 0.000109550 -0.000005905 -0.000015905 -0.000006636 0.000020920 0.000134604 -0.000006079 0.000010120 -0.000011193 -0.000049302 -0.000156186 0.000010058 0.000000806 0.000011986 -0.000004909 0.000055212 -0.000005673 0.000003806 -0.000004175 -0.000024263 -0.000044123 -0.000003235 0.000026608 0.000003830 0.000003179 0.000096808 -0.000010323 -0.000013059 -0.000009270 -0.000327867 -0.000860783 -0.000094527 0.000870037 0.000020032 0.000096973 -0.000670633 -0.000312709 0.000213719 0.000113051 0.001350804 0.002944368 -0.001174917 -0.001929670 0.000318104 0.000583523 0.000436415 -0.001583174 -0.000007887 0.000184691 0.000321561 0.000119616 -0.001316740 0.000273588 0.000452337 0.001552776 0.002239219 -0.001259048 -0.001056198 0.000170825 -0.000159333 -0.000912746 0.000090778 -0.000036095 0.000063522 -0.000166102 -0.000850904 0.000080342 -0.000063263 0.000063695 0.000101361 -0.000173114 -0.000001510 -0.000106100 0.000014305 -0.000294837 -0.001122393 0.000123243 0.000031927 0.000077549 -0.000241225 -0.000862068 0.000103243 -0.000005643 0.000062511 0.000317624 0.000731384 -0.000095036 -0.000123938 -0.000049964 -0.000021823 -0.000046692 0.000002710 0.000003602 -0.000004258 0.000022453 0.000043627 -0.000005516 -0.000000067 0.000000754 0.000030019 -0.000081924 0.000022281 -0.000014864 0.000004237 0.000020341 0.000035574 -0.000006874 0.000017233 0.000009271 0.000024090 0.000199952 -0.000020114 0.000003495 -0.000007403 -0.000040410 -0.000027409 0.000001026 0.000000154 -0.000005660 0.000016908 -0.000122434 0.000018587 -0.000004017 0.000006888 -0.000016667 0.000126740 -0.000015649 0.000001057 -0.000006433 0.000024642 0.000075377 -0.000003162 -0.000015363 -0.000004276 -0.000002658 0.000030287 -0.000002600 -0.000005827 -0.000004156 0.000014234 0.000139367 -0.000016152 -0.000003527 -0.000004516 0.000027538 -0.000025205 0.000008348 -0.000008310 0.000003575 -0.000030345 -0.000058926 0.000001036 0.000010155 0.000000724 0.000009894 -0.000019575 0.000003003 0.000000632 0.000001716 -0.000021530 -0.000003620 -0.000004330 0.000011081 0.000000331 -0.000018431 0.000021174 -0.000005361 0.000005220 -0.000001509 -0.000008880 0.000001584 -0.000001930 0.000003633 -0.000000142 -0.000007755 -0.000037268 0.000001691 0.000006687 0.000001818 -0.000005621 0.000073711 -0.000007220 -0.000006841 -0.000006554 -0.000013168 -0.000151514 0.000015748 0.000005031 0.000006980 0.000033821 0.000040675 -0.000000212 -0.000011493 0.000000882 0.000007937 0.000109385 -0.000012348 -0.000003315 -0.000003725 -0.000018599 0.000017363 -0.000005959 0.000007447 0.000000186 0.000019931 -0.000053930 0.000011852 -0.000011205 0.000001304 -0.000000448 -0.000006425 -0.000000578 0.000005395 0.000001228 0.000003533 0.000050657 -0.000006708 0.000002970 -0.000000898 -0.000023175 -0.000051326 0.000002496 0.000007980 0.000001095 -0.000007336 0.000018764 -0.000003731 0.000003066 -0.000001385 -0.000004261 0.000033522 -0.000004286 0.000000573 -0.000001749 -0.000010419 -0.000037818 0.000002032 0.000006292 0.000001774 -0.000055271 -0.000307276 0.000026063 0.000021167 0.000014952 -0.000011143 -0.000092161 0.000005463 0.000036650 0.000014793 -0.000014809 -0.000099384 0.000005424 0.000019980 0.000007228 -0.000011868 -0.000061740 0.000005324 -0.000000128 0.000002419 0.000014944 0.000097329 -0.000008445 -0.000019181 -0.000008835 -0.000010715 -0.000028976 0.000004222 -0.000008568 0.000000547 0.000025245 0.000139703 -0.000012325 -0.000009512 -0.000006532 -0.000011859 -0.000000208 0.000001562 -0.000014027 -0.000004804 0.000020837 0.000071444 -0.000003617 -0.000020650 -0.000004616 -0.000012728 -0.000051951 0.000005019 0.000000746 0.000002657 -0.000017932 -0.000064414 0.000005718 0.000002264 0.000002789 0.000000757 -0.000031469 0.000004741 -0.000007442 0.000001985 -0.000012076 -0.000086920 0.000007924 0.000003873 0.000004390 0.000002731 -0.000014726 0.000001419 0.000002111 0.000001093 -0.000019247 -0.000055670 0.000002712 0.000013745 0.000002164 -0.000000276 0.000005840 0.000001093 -0.000008141 -0.000001040 0.000000215 -0.000008763 0.000001411 -0.000003636 -0.000000102 -0.000008140 -0.000007589 -0.000000035 0.000004158 -0.000000078 -0.000002205 0.000013837 -0.000000133 -0.000003831 -0.000001280 0.000017063 0.000051897 -0.000007188 0.000012027 0.000000293 0.000011514 0.000016666 -0.000000713 -0.000003077 0.000000335 -0.000020710 -0.000072473 0.000007875 -0.000005734 0.000001733 0.000008305 0.000052071 -0.000004202 -0.000011716 -0.000005258 0.000005746 0.000007175 0.000001004 -0.000013371 -0.000001903 0.000002348 -0.000009770 0.000000343 0.000002354 0.000000708 0.000009856 0.000047449 -0.000003660 -0.000007847 -0.000003035 -0.000005247 0.000002012 -0.000001148 0.000005007 -0.000000352 0.000000847 0.000005614 0.000000277 -0.000004247 -0.000000520 0.000003253 0.000025317 -0.000000978 -0.000007141 -0.000001524 -0.000005480 0.000005884 -0.000000942 0.000002567 -0.000000619 -0.000306926 -0.011602608 -0.001222712 -0.013719506 0.000703380 -0.001146478 -0.001447729 0.000605264 0.002764581 0.002112396 -0.000310045 -0.009100598 -0.001616939 -0.008632903 0.000080414 0.000131629 0.000509190 -0.001419195 0.000419714 -0.000967980 0.000555702 0.001697949 -0.000488231 0.000397587 -0.000690219 -0.000122728 0.000232390 -0.001155402 -0.000008336 -0.000548920 0.000265588 0.000423414 -0.000090150 -0.000206333 0.000004230 0.000782843 0.000800957 -0.000890963 -0.001551853 -0.000405993 0.000613731 0.001675610 -0.001094630 -0.002066836 0.000366740 -0.000426503 0.000157333 -0.000077765 -0.000268979 0.000182503 0.000528914 0.001872177 -0.000092683 0.000014359 -0.000189371 0.000516724 0.003675397 -0.000666507 -0.000093141 -0.000188940 -0.002480070 -0.002992258 0.009865389 -0.005103829 -0.000706729 0.001948566 0.009552200 -0.009937935 0.004910291 0.000340118 -0.000665863 -0.003501103 0.008111400 -0.003050476 -0.000927359 -0.000817565 -0.001461807 -0.000643030 0.000936867 0.000143152 -0.000759521 -0.002697812 -0.001884759 0.000959778 0.000547201 0.000554784 0.002167229 -0.000145446 -0.000023924 -0.000132947 -0.000154379 0.000652165 -0.000138459 0.000420352 -0.000076503 -0.000060578 -0.001110434 0.000081550 -0.000313784 -0.000068897 0.000107645 -0.000138269 -0.000071232 0.000081003 0.000016157 -0.001784317 -0.001639728 0.001431173 -0.000378027 -0.000121411 -0.000367679 -0.003274059 -0.000440060 0.000968383 0.000299231 -0.000185475 0.002407186 0.000023954 -0.000456106 -0.000082445 0.307792518 0.073237483 0.078784639 -0.000510381 -0.007217440 0.221360302 -0.001886903 -0.026081676 0.127984648 0.681364180 0.000242307 -0.004300575 -0.038274812 0.010716066 0.676114495 0.000037168 0.000061137 -0.013035199 -0.015405090 0.002908732 0.000225325 0.000211046 -0.017125223 -0.071251695 0.012773736 0.000109655 -0.000003501 0.002490549 0.010720055 -0.002092931 0.000284388 -0.000619689 -0.080967483 -0.048624540 0.036650414 0.000994177 -0.002280985 -0.054132829 -0.244896242 0.131177580 0.001949633 0.000587074 0.021785696 0.066304969 -0.207455180 -0.000652387 0.000636844 -0.080060606 -0.053554908 -0.015693871 0.000808826 0.000901610 -0.051985530 -0.309963849 -0.094425338 -0.000410780 -0.005316125 -0.001431996 -0.031404561 -0.152756534 -0.000062618 -0.000325641 0.010495561 0.006629108 -0.007093672 -0.000177801 -0.001467754 0.004502854 0.018600440 -0.034811284 0.000305423 0.000207993 -0.021433162 -0.086490779 -0.007126090 -0.000015385 0.000116250 0.010062918 0.005416248 0.006051715 0.000042452 0.000231580 0.011265640 0.051097310 0.012557422 -0.000161009 -0.000217727 0.019901121 0.066846143 -0.042973238 0.000109067 0.000119469 0.002359644 -0.005964085 -0.002677018 0.000301830 0.001172827 -0.003370032 -0.015379045 -0.010415942 -0.000115531 -0.000859846 0.003775454 0.017457042 0.009509216 0.000066416 -0.000001082 0.002797812 -0.003907845 0.002495899 0.000068720 0.000253450 -0.004803812 -0.012619129 0.015888031 0.000036500 0.000048841 -0.002773549 -0.011154173 0.012971992 0.000057542 -0.000015557 0.007110402 -0.001641833 0.000508796 -0.000000487 -0.000050747 -0.001418938 0.001832114 -0.000593933 -0.000038682 -0.000444962 0.000600538 -0.000288441 -0.005553123 0.000002714 -0.000011926 0.006993856 -0.000954654 0.000472755 -0.000013744 0.000006207 -0.001173964 0.001325572 -0.001785696 -0.000007538 -0.000031194 -0.000262690 -0.002288365 -0.004889898 0.000007841 0.000009799 -0.000649166 0.000085020 -0.000049795 0.000021002 0.000084977 -0.000191094 -0.001243563 0.000339650 -0.000000614 -0.000022581 -0.000015012 0.000457639 0.000799490 -0.000117556 0.000167271 0.000273605 -0.000284095 -0.000183564 0.000520244 -0.000766591 -0.000403862 0.000273555 0.000022464 0.000193325 -0.000222523 -0.000211715 0.000079818 -0.000075436 0.000051949 -0.000080145 0.000001013 0.000060988 0.000131129 -0.000134050 0.000136401 0.000301544 -0.000124735 0.000062043 -0.000286974 0.000348547 0.000098690 0.000081509 0.000200602 0.000014353 -0.000027189 -0.000049944 0.000051324 0.000031036 0.000002938 -0.000000102 0.000000592 0.000003467 -0.000024275 0.000003148 -0.000009786 -0.000011401 0.000017362 0.000018178 0.007655431 -0.008388711 -0.007169073 0.007957648 -0.012159085 -0.006692165 0.006079549 -0.000632065 0.000087483 0.003567332 -0.001362254 0.001147199 -0.005171006 0.001537834 -0.006822313 -0.002212516 0.001816282 -0.005570983 -0.002435822 -0.006337826 -0.002575840 0.000720105 0.003275154 -0.000340656 0.001761652 0.003914667 -0.005274859 -0.009002578 0.006819112 -0.003193783 0.000337208 -0.000187790 -0.003176396 0.002598128 0.002976352 -0.001142625 0.002422355 0.001469183 -0.004338659 -0.001275195 -0.001302091 0.002591823 0.000066213 -0.002691909 -0.000968548 -0.000226136 0.000290605 0.000408347 0.000111624 0.000099718 0.000781957 -0.001581069 -0.001213865 0.002439382 0.000514876 0.000286752 -0.000574779 -0.000578411 0.000995092 0.000157926 0.000070238 -0.000116504 -0.000154530 0.000125063 -0.000022681 -0.000125760 0.000262415 0.000235891 -0.000439082 -0.000101287 -0.000015463 0.000045900 0.000055480 -0.000070200 -0.000019884 0.000005621 0.000035990 -0.000053147 -0.000362912 -0.000146336 -0.000080644 0.000141979 0.000264748 0.000250173 0.000117551 -0.000021653 0.000048895 0.000099882 0.000039418 -0.000073255 0.000033653 -0.000052408 -0.000039967 0.000030764 -0.000043956 -0.000089149 0.000206318 0.000120837 -0.000336298 -0.000058495 -0.000050824 0.000107682 0.000087030 -0.000171980 -0.000028787 0.000680326 -0.000754006 0.000058154 0.001749746 0.001994313 0.002076582 -0.001610614 -0.001101429 0.003051227 -0.000302373 -0.000734683 0.000526103 0.000645217 -0.001055196 0.000144643 -0.000094037 0.000409107 0.000388660 -0.000051824 -0.000239986 -0.000008713 0.000190775 0.000198367 -0.000474217 0.000006296 0.000211520 -0.000689733 -0.000342898 0.000399971 0.000810311 -0.000022526 0.000030202 0.000023994 -0.000022806 -0.000006777 0.000025564 -0.000046524 -0.000059526 0.000059794 0.000037731 0.000000118 -0.000006942 -0.000004030 0.000013034 0.000014922 0.000019602 -0.000033996 -0.000018925 0.000048913 0.000036573 -0.000005365 0.000011864 0.000024446 -0.000018095 0.000014137 0.000024005 -0.000044103 -0.000032459 0.000071543 0.000002713 -0.000030882 0.000072351 0.000094829 -0.000113308 0.000005584 0.000012481 -0.000026381 -0.000016105 0.000033815 0.000007388 -0.000018890 0.000045179 0.000037259 -0.000078692 0.000013636 0.000022145 -0.000063648 -0.000074887 0.000038084 0.000191696 0.000013153 0.000008999 -0.000092271 -0.000109562 -0.000128019 0.000004234 -0.000019587 0.000060497 0.000168043 0.000024515 0.000005311 -0.000028605 0.000023799 0.000068506 -0.000019242 -0.000002614 0.000021220 -0.000020440 -0.000073286 -0.000009304 -0.000005058 0.000034641 -0.000064224 -0.000300697 -0.000032767 -0.000017882 0.000048117 -0.000024922 -0.000141035 -0.000035415 -0.000012036 0.000020368 0.000033103 0.000019608 0.000009628 -0.000017271 0.000034781 0.000022641 -0.000121491 0.000018755 0.000019467 -0.000039120 -0.000024066 0.000054565 0.000014620 0.000003737 -0.000002620 -0.000002727 0.000002998 0.000011483 -0.000022432 0.000047293 0.000038007 -0.000073591 -0.000020765 -0.000011651 0.000043639 0.000029594 -0.000082320 0.000008911 0.000004670 -0.000009163 -0.000003666 0.000005709 -0.000011360 0.000011585 -0.000027577 -0.000021959 0.000065540 0.000023756 -0.000001904 -0.000003046 -0.000008465 -0.000011660 -0.000010701 0.000004887 -0.000017676 -0.000009284 0.000016920 -0.000013184 0.000004205 -0.000009302 0.000011242 0.000021406 -0.000009767 0.000008421 -0.000087187 -0.000031312 0.000217171 -0.000147626 0.000005128 0.000012307 0.000061830 0.000050981 0.000051764 -0.000031851 0.000108382 0.000066181 0.000067440 -0.000285193 0.000035662 -0.000095960 -0.000302993 -0.000144761 -0.000231212 -0.000007047 -0.000027073 -0.000014130 0.000155523 -0.000120251 -0.000045536 0.000090478 0.000000261 0.000341242 -0.000344397 0.000020360 -0.000019135 -0.000000801 0.000096450 0.000083144 0.000019181 -0.000040148 -0.000023039 0.000091934 0.000011114 -0.000018478 0.000062032 0.000058272 -0.000023777 0.000002838 -0.000000152 0.000016932 0.000037236 -0.000088816 -0.000017355 -0.000024175 0.000031882 0.000158100 -0.000115622 -0.000066329 0.000018489 -0.000016425 0.000266995 0.000156544 -0.000060325 0.000021297 -0.000020204 -0.000193715 0.000050153 0.000085248 0.000019542 -0.000011660 -0.000245621 -0.000052692 0.000131083 0.000001165 0.000012056 -0.000046774 -0.000025953 0.000016826 0.000003594 0.000008958 0.000299264 -0.000066500 -0.000069684 -0.000017736 0.000038005 0.000025128 0.000041511 0.000032079 0.000029811 0.000020533 -0.000255918 -0.000032279 0.000107656 0.000035183 -0.000024716 -0.001383491 0.000656358 -0.000301040 0.000021566 0.000003140 0.000451085 -0.000133679 -0.000002813 -0.000034819 0.000004651 -0.000032236 0.000098357 -0.000047084 0.000001452 -0.000001473 -0.001087150 0.000307351 -0.000052253 -0.000034554 -0.000006653 0.000178632 -0.000028531 0.000157210 -0.000004984 -0.000033846 0.000049760 -0.000054928 -0.000045026 0.000006222 -0.000000104 0.000252056 0.000160652 0.000025979 0.000019384 0.000017325 0.000343738 -0.000131880 -0.000058790 -0.000015330 -0.000016479 -0.000341624 -0.000025259 0.000036235 -0.000008861 0.000017174 0.000027175 -0.000015132 0.000001392 -0.000004797 0.000014680 -0.000001373 -0.000012710 0.000008105 -0.000003845 0.000003079 -0.000001743 -0.000006027 -0.000001219 -0.000025166 0.000021998 0.000032528 -0.000030153 -0.000003653 0.000018797 -0.000018665 -0.000035191 0.000020242 -0.000008312 -0.000004047 0.000026169 -0.000009906 -0.000006990 0.000017612 -0.000244491 -0.000217929 -0.000576181 -0.000039416 -0.000537784 -0.000210024 -0.000257290 0.000322898 -0.000005434 -0.000275656 -0.000422334 -0.000302651 0.000155460 -0.002333552 0.000360466 0.000001284 0.000018378 0.000004583 0.000065150 0.000042448 -0.000005337 -0.000018428 -0.000052350 -0.000052072 -0.000055787 0.000000145 0.000011899 -0.000085108 -0.000128962 -0.000190502 0.000004177 0.000010441 -0.000006529 -0.000063139 0.000006858 0.000001048 0.000005509 -0.000016981 -0.000013328 0.000018352 0.000005280 -0.000004501 -0.000003096 -0.000031443 -0.000026699 -0.000009178 0.000017275 0.000029501 -0.000031003 -0.000026502 -0.000000554 0.000000176 0.000001967 0.000000872 -0.000006521 0.000006285 -0.000009437 -0.000010555 0.000007749 -0.000013230 0.000004962 -0.000011550 -0.000019224 0.000014951 0.000028712 0.000002741 -0.000006041 -0.000010013 0.000009002 0.000007661 0.000008621 -0.000016330 -0.000023970 0.000023252 0.000010436 -0.000017988 0.000041172 0.000064313 -0.000067858 -0.000050698 -0.000001218 0.000002284 0.000008839 -0.000001720 -0.000011138 -0.000000332 -0.000001733 0.000004123 0.000005652 0.000000516 0.000004365 -0.000014747 -0.000025750 0.000026054 0.000030700 -0.000003985 0.000006380 0.000003435 -0.000004731 0.000003859 -0.000004780 0.000010133 0.000012279 -0.000013393 0.000002908 -0.000003065 0.000009957 0.000018173 -0.000022002 -0.000015381 -0.000006378 0.000012102 0.000019528 -0.000021391 -0.000000827 -0.000007604 0.000015389 0.000020160 -0.000025489 -0.000005931 0.000000391 -0.000000299 -0.000002438 0.000001749 0.000006013 0.000001049 0.000001879 0.000000373 -0.000002926 -0.000003769 -0.000001769 0.000003460 0.000005775 -0.000006704 -0.000006707 0.000000695 -0.000003169 -0.000002087 0.000004395 -0.000001649 0.000005606 -0.000008212 -0.000012871 0.000004807 0.000001148 0.000001408 -0.000003270 -0.000004244 0.000002108 -0.000002968 0.000055822 -0.000133912 -0.000187347 0.000206538 0.000123720 0.000030488 -0.000065953 -0.000082125 0.000098418 0.000039187 -0.000019304 0.000012607 0.000016176 0.000037741 0.000022299 0.000002563 -0.000005124 -0.000007518 0.000006696 0.000001239 0.000005085 -0.000009971 -0.000011104 0.000014070 0.000008420 -0.000006579 0.000011497 0.000010454 -0.000013020 -0.000004526 0.000000473 -0.000002050 -0.000004980 0.000005865 0.000007382 0.000000729 -0.000000068 0.000002383 0.000000425 -0.000004261 -0.000000594 -0.000001548 -0.000007679 0.000006700 0.000011812 -0.000031075 0.000033698 -0.000002845 -0.001033520 0.000455112 0.000024907 0.000042157 -0.000111972 0.000155106 -0.000088000 0.000190187 0.000120263 0.000085684 0.001198143 -0.000318545 0.000479249 0.000095573 -0.000096311 0.000841568 0.000370055 -0.000118538 0.000244282 -0.000121353 -0.000094469 0.000118148 0.000417044 -0.000059332 -0.000152724 0.000548260 -0.000002317 -0.000016824 0.000047317 0.000068101 -0.000083282 -0.000048190 -0.000023035 0.000052802 0.000062821 -0.000084926 -0.000033514 0.000002281 0.000011794 0.000020548 -0.000046273 -0.000028296 -0.000025688 0.000057510 0.000076327 -0.000085217 -0.000049168 -0.000025820 0.000049147 0.000064083 -0.000053966 -0.000013778 0.000023594 -0.000034127 -0.000048340 0.000014869 0.000012117 -0.000004077 0.000002521 0.000006154 -0.000002411 0.000004309 0.000002928 -0.000002586 -0.000003326 0.000003284 -0.000000211 -0.000000938 -0.000000552 0.000005792 -0.000007540 -0.000012700 0.000007353 -0.000003479 -0.000004584 0.000004630 -0.000010835 0.000006201 -0.000008402 -0.000016132 0.000023022 0.000011164 -0.000005484 0.000003501 0.000005719 -0.000001775 0.000008023 -0.000001492 0.000001787 0.000009248 -0.000012265 -0.000011209 0.000001609 -0.000002027 -0.000009665 0.000013567 0.000011706 0.000001478 -0.000002560 -0.000005192 0.000005355 0.000005250 -0.000000895 -0.000000399 -0.000001712 0.000003212 0.000006189 0.000003889 -0.000004089 -0.000011325 0.000012855 0.000008179 0.000001153 -0.000000736 0.000002147 -0.000004366 -0.000005181 -0.000002592 0.000003172 0.000004711 -0.000004424 -0.000000775 0.000000449 -0.000000360 0.000001420 -0.000002208 -0.000003893 -0.000000405 0.000000969 -0.000000377 0.000000889 -0.000000023 -0.000000472 0.000000592 -0.000001865 0.000002812 0.000003553 -0.000000096 0.000000399 -0.000000281 0.000000626 0.000000464 -0.000000608 0.000001063 0.000002673 -0.000003050 -0.000003380 -0.000000714 -0.000000942 -0.000004227 0.000007028 0.000011771 -0.000003491 0.000004621 0.000012209 -0.000013930 -0.000008955 0.000003204 -0.000002528 -0.000004501 0.000001907 -0.000003538 0.000002978 -0.000003014 -0.000009145 0.000010360 0.000006716 0.000000327 0.000000540 -0.000001611 0.000002596 0.000002628 -0.000001277 0.000000499 0.000005210 -0.000006563 -0.000003719 0.000000627 -0.000000281 0.000000288 -0.000000069 -0.000002833 0.000001869 -0.000001840 -0.000004314 0.000005057 0.000001510 -0.000002355 0.000002557 0.000003975 -0.000004216 -0.000000719 -0.000000065 -0.000000188 -0.000001592 0.000002213 0.000002172 0.000000244 -0.000000568 -0.000002751 0.000003447 0.000003235 -0.000000821 0.000001325 0.000002733 -0.000003060 -0.000002988 -0.000007053 0.000011258 0.000023893 -0.000027744 -0.000020322 0.000003605 0.000000142 0.000005566 -0.000002877 -0.000020458 -0.000000435 0.000002362 0.000006658 -0.000008185 -0.000013461 -0.000001779 0.000002689 0.000004160 -0.000004772 -0.000001417 0.000000037 -0.000002075 -0.000007394 0.000006197 0.000012418 -0.000002098 0.000002656 0.000002354 -0.000002563 0.000005654 0.000003381 -0.000004941 -0.000010831 0.000011487 0.000007422 -0.000003456 0.000002185 0.000000857 -0.000001567 0.000009553 0.000000900 -0.000001643 -0.000005276 0.000004975 0.000008034 -0.000001707 0.000002615 0.000003976 -0.000004135 -0.000000296 -0.000002245 0.000003106 0.000004887 -0.000005820 -0.000001132 -0.000000739 0.000001696 0.000002338 -0.000002625 0.000001066 -0.000001828 0.000003122 0.000006478 -0.000007703 -0.000004608 0.000000218 -0.000000032 0.000001099 -0.000001414 -0.000002769 -0.000001534 0.000001692 0.000004312 -0.000004697 -0.000004862 -0.000000766 0.000000665 -0.000000214 0.000000012 0.000004115 -0.000000447 0.000000564 0.000000773 -0.000000909 0.000000875 -0.000000621 0.000000459 0.000000647 -0.000000852 -0.000000475 -0.000000670 0.000000255 -0.000000729 0.000000679 0.000003033 0.000003967 -0.000004022 -0.000004451 0.000005409 -0.000007236 0.000001370 -0.000001021 -0.000001340 0.000001595 -0.000000953 -0.000003537 0.000004357 0.000005634 -0.000006875 0.000002793 -0.000000139 -0.000001043 -0.000003745 0.000003268 0.000006862 -0.000000720 0.000000644 -0.000000405 0.000000072 0.000005383 0.000000410 -0.000000195 0.000000630 -0.000000655 -0.000002416 0.000000684 -0.000001361 -0.000003478 0.000003655 0.000004618 -0.000000157 -0.000000153 -0.000000179 0.000000060 -0.000000923 -0.000000293 0.000000225 -0.000000313 0.000000304 0.000002294 -0.000000042 -0.000000247 -0.000001772 0.000001995 0.000004233 -0.000000362 0.000000032 -0.000000403 0.000000367 0.000000583 -0.001300751 -0.000153377 -0.001607888 0.000126240 0.000549708 0.000504199 0.001698740 0.000552976 -0.000701099 -0.000207227 -0.000772449 0.000411187 -0.001062566 0.000079396 0.000313262 0.000069778 -0.000928952 -0.000006821 0.000243992 -0.000078126 0.000506182 -0.000376007 0.000024831 0.000387496 -0.000060743 0.000186839 -0.000013761 -0.000138614 0.000001252 -0.000033700 -0.000215604 0.000171753 -0.000146366 0.000015477 0.000009379 0.000115438 -0.000359956 -0.000259382 0.000574417 -0.000029171 -0.000192191 0.000052908 -0.000647667 0.000346248 0.000114819 0.000033549 0.000179454 0.000003524 -0.000085601 0.000019754 0.000040294 0.000120982 -0.000125339 0.000051113 0.000015110 0.000379657 -0.000375439 -0.000058743 0.000414497 -0.000020994 0.000465724 -0.000333314 0.000208395 -0.000403056 0.001397338 0.000159415 -0.000033335 -0.000444419 0.000795457 -0.001430186 0.000380406 -0.000625222 0.000019726 0.000123267 0.001288732 -0.000019553 0.000069829 -0.000015703 -0.000071319 -0.000125224 -0.000253686 0.000418579 0.000230302 -0.000310449 -0.000131394 0.000130281 -0.000085554 0.000085642 -0.000061592 0.000220783 -0.000010161 -0.000043073 -0.000021079 0.000052485 0.000014751 0.000097126 0.000016875 0.000374898 -0.000247795 0.000135503 0.000010581 -0.000010153 0.000050919 -0.000005964 0.000232266 -0.000080328 0.000063689 -0.000118301 -0.000026854 -0.000000850 -0.000114157 0.000231128 0.000263212 -0.000357867 0.000063075 -0.000056384 -0.000002862 -0.000125522 0.000141774 -0.000358166 0.175698571 0.125742679 0.668313571 -0.023408365 0.016104654 0.759533879 0.011073272 0.007579697 -0.007198154 0.177814930 0.003102955 0.016719162 -0.035325348 0.128093470 0.713947874 -0.020745146 -0.089463229 -0.005388427 -0.023388508 0.033432950 0.010775828 0.007487732 0.005892587 0.006017169 -0.014349492 0.010044026 0.055430182 0.015667162 -0.016456038 -0.051013927 0.018621127 0.067575812 -0.041357080 -0.004622520 -0.004167912 -0.081845641 -0.048460408 0.041563993 -0.009503862 -0.001584462 -0.051919325 -0.256450706 0.140572162 -0.002017648 -0.009709066 0.024178776 0.069079162 -0.225093500 0.009456615 0.022908880 -0.080772243 -0.057267237 -0.022209991 -0.069084805 -0.012113294 -0.055921277 -0.318964183 -0.109610487 -0.016985829 -0.135221751 -0.005004487 -0.037173339 -0.162410824 -0.004504555 -0.074127244 0.007051259 -0.001285850 0.000149682 -0.047062478 -0.049436754 -0.001045089 0.001904177 -0.000665408 -0.051950888 -0.298584766 0.000638718 0.000031524 -0.005518024 -0.016186105 -0.090118085 0.007137207 -0.001513759 0.000164964 0.006635595 -0.002109778 -0.001311085 0.000671771 -0.002259721 -0.001697019 -0.002267044 0.000079956 -0.001988898 -0.004828105 -0.000493123 -0.003169475 0.002760525 -0.005575582 -0.002756523 -0.000610405 0.000417447 -0.003727073 -0.013643736 -0.010606340 0.000341787 0.000581344 0.004403864 0.019564378 0.011139688 0.000175887 0.000679182 0.002763950 -0.004651625 0.004673079 0.003600688 -0.000043073 -0.004832740 -0.014693491 0.020598845 0.001285508 0.007700226 -0.002824435 -0.010485689 0.011064624 0.006169427 0.025329501 -0.041213151 -0.004598302 0.000787170 0.006798723 -0.002863044 -0.004782779 -0.067505576 -0.046004864 -0.002778739 -0.004486654 0.001113760 -0.046408973 -0.335193829 -0.000242383 -0.002118667 0.000010982 0.000015791 0.000068115 0.000021824 0.000049621 -0.000071668 -0.000167329 0.000168386 0.000200443 0.000360718 -0.000029294 -0.000064320 0.000072059 0.000097987 0.000158008 -0.000002122 0.000004383 -0.000082882 -0.000051576 -0.000085870 0.000033689 0.000071911 -0.000107523 -0.000113758 -0.000226014 0.000048029 0.000103677 -0.000131287 -0.000119386 -0.000260062 -0.000023799 0.000004761 -0.000001925 -0.000011488 -0.000007623 -0.000001169 -0.000004679 0.000002254 0.000001439 0.000008650 -0.000001010 -0.000001354 -0.000016016 -0.000009028 -0.000015032 0.000275272 0.000431338 -0.000956327 -0.002474667 -0.003164777 -0.000048222 0.000151732 -0.000188045 0.000603457 0.000410045 -0.000010504 0.000460811 0.000491482 -0.000445946 -0.000357747 -0.000278693 0.000201759 0.000943643 -0.001282393 0.001730834 -0.000163450 -0.000196468 0.000171358 0.000567283 0.001293812 0.000237072 -0.000191340 -0.002719280 -0.001534299 -0.001381714 0.000209245 -0.000338089 0.000337267 0.000700367 -0.001042768 -0.000408745 -0.000448716 0.000879747 0.000282675 0.001512024 -0.000253110 0.000139775 0.001441208 0.000029796 0.000602372 0.000143983 0.000416955 -0.000476742 -0.000148695 0.000069901 0.000162068 0.000137478 -0.000468832 -0.000662328 -0.001481851 0.000512444 0.000119470 -0.000644381 -0.000275196 -0.000592031 0.000013046 -0.000025263 0.000040470 -0.000018484 -0.000057490 -0.000049397 -0.000031408 0.000144573 0.000137932 0.000269222 -0.000066934 0.000013568 0.000084322 0.000030222 0.000063680 -0.000112432 -0.000256713 0.000368034 0.000119123 0.000211616 0.000248834 0.000502043 -0.000216564 -0.000049391 -0.000007299 -0.000010261 0.000070780 0.000018593 -0.000000093 0.000015212 -0.000036860 -0.000034869 0.000118746 0.000018806 0.000009319 -0.000024498 -0.000047352 0.000061148 0.000123313 0.000210683 -0.000031344 -0.000017121 0.000001351 0.000043671 0.000097624 0.000172784 0.000059746 -0.000285948 0.000067987 0.000032167 0.000259858 0.000387265 -0.000643307 0.000128901 -0.002271310 -0.000272230 -0.000114366 0.000739266 -0.000124768 0.000555875 0.000046162 0.000542111 0.000156195 -0.001594871 -0.000153817 -0.000056701 -0.000071417 0.000049440 0.000362445 0.000599932 0.000165347 -0.000277941 -0.000578765 0.000713390 0.000224889 -0.000005789 0.000008759 0.000006996 0.000004502 0.000006891 0.000007104 -0.000008698 -0.000034172 -0.000012430 -0.000031761 -0.000012707 0.000003621 0.000000099 -0.000000987 -0.000008182 0.000003521 0.000000574 -0.000016513 -0.000009998 -0.000031827 -0.000009520 -0.000000036 0.000004062 0.000006190 0.000012660 0.000014204 0.000002587 -0.000008299 -0.000020996 -0.000044782 -0.000017352 -0.000006229 0.000046363 0.000043605 0.000060703 0.000003479 -0.000001002 -0.000010859 -0.000009955 -0.000018229 -0.000015655 -0.000017482 0.000036411 0.000042917 0.000047040 -0.000028691 0.000016691 -0.000060649 -0.000041022 -0.000112188 -0.000031926 -0.000138474 0.000064064 0.000058661 0.000083787 0.000076112 0.000079914 -0.000158599 -0.000041581 -0.000103032 0.000018190 0.000005739 -0.000230371 -0.000037965 -0.000100172 -0.000163145 -0.000144372 0.000209126 0.000055822 0.000076655 -0.000130224 -0.000200265 0.000218205 0.000081374 0.000162514 -0.000064550 -0.000096751 0.000076042 0.000050903 0.000103714 0.000022753 0.000042892 -0.000047034 -0.000002971 -0.000001808 -0.000083057 -0.000074584 0.000091917 0.000035673 0.000078766 -0.000005079 0.000001640 0.000004332 -0.000014607 -0.000047260 0.000008434 -0.000009701 -0.000020360 0.000009142 -0.000004294 -0.000014807 0.000001816 0.000034161 0.000013261 0.000035821 -0.000025010 -0.000031345 0.000034606 0.000057552 0.000043082 -0.000002125 0.000001861 0.000008799 -0.000011739 0.000001559 0.000001940 0.000014962 -0.000027515 -0.000013594 -0.000030374 0.000110335 -0.000024167 -0.000086408 -0.000016610 -0.000001854 -0.000017984 0.000011521 0.000022645 -0.000036250 -0.000024846 -0.000026620 0.000015177 0.000082788 -0.000011838 -0.000010976 0.000031533 0.000056095 -0.000004118 -0.000301644 -0.000155473 0.000004729 0.000024456 -0.000000152 -0.000038125 -0.000087070 0.000016322 0.000169261 0.000108480 -0.000471790 -0.000034183 0.000062464 -0.000473226 -0.000051075 -0.001227241 -0.000024896 0.000103072 0.000168577 -0.000017084 -0.000208660 0.000155650 0.000123483 0.000010073 0.000079880 -0.000697535 -0.000170265 -0.000006526 0.000014309 -0.000015845 0.000090709 -0.000219215 0.000003034 0.000009839 -0.000009521 -0.000073459 -0.000100596 -0.000012454 0.000060600 0.000037737 0.000006815 -0.000043742 0.000030876 -0.000066647 0.000062100 -0.000003283 -0.000011309 0.000000456 0.000077467 -0.000011836 0.000026166 -0.000054152 -0.000062429 0.000346512 -0.000199344 -0.000051734 -0.000142104 0.000017113 -0.000107101 0.000029185 0.000017990 0.000061978 0.000035157 -0.000280642 0.000099880 -0.000055364 0.000063972 0.000009632 -0.000078553 0.000084490 0.000001488 -0.000001228 -0.000027230 0.000117149 -0.000052432 -0.000013274 -0.000060709 0.000016723 0.000118538 -0.000050366 -0.000006070 -0.000017214 0.000050800 -0.000316340 0.000135422 -0.000088879 0.000097278 -0.000013418 -0.000144349 0.000038601 0.000327495 -0.000150047 -0.000216687 -0.000141836 -0.000124395 0.000201745 -0.000492545 0.000016877 0.000163748 -0.000146132 -0.000194134 0.000044773 -0.000115023 0.000012002 -0.000140618 0.000243675 0.000106972 0.000171511 -0.000208355 0.000159068 -0.000007872 0.000054741 -0.000039553 0.000162720 -0.000185432 0.000142337 0.000005151 0.000048252 0.000261099 -0.000175198 -0.000057261 -0.000095977 -0.000066532 0.000100243 -0.000005326 -0.000087976 -0.000179418 0.000115898 -0.000205550 0.000162574 0.000064936 0.000131128 -0.000003657 0.000001200 -0.000018360 -0.000018783 -0.000014759 0.000002376 -0.000008920 0.000001731 -0.000010494 0.000001084 0.000007455 -0.000001447 0.000012107 0.000009004 0.000001013 0.000004143 0.000009217 -0.000014737 0.000011290 -0.000012839 -0.000009279 0.000005598 0.000006894 0.000024001 0.000024394 0.000004578 -0.000003226 0.000000704 -0.000044813 -0.000022978 -0.000041673 -0.000351315 -0.000122124 -0.002014897 0.002780034 -0.000139149 -0.000026682 -0.000104555 0.002022386 0.000912119 -0.001252662 -0.001912409 -0.001069786 0.000508471 0.001934043 0.000147750 0.000074571 0.000253871 0.000034578 -0.000091401 0.000072380 0.000092898 -0.000090134 0.000050283 -0.000066234 -0.000079303 -0.000183202 0.000198322 -0.000022940 -0.000007387 0.000013719 -0.000060615 0.000079762 0.000011117 0.000066481 0.000023267 -0.000039949 0.000015735 0.000004815 0.000021097 -0.000030718 -0.000021396 0.000013341 0.000000940 0.000009235 0.000012457 -0.000009193 0.000002893 0.000005707 0.000002012 0.000000507 -0.000003968 -0.000006398 -0.000002208 -0.000003446 -0.000012729 -0.000008202 0.000011176 -0.000000578 0.000002094 -0.000011099 0.000005037 -0.000004806 -0.000004254 -0.000008024 -0.000002898 0.000000241 -0.000002230 -0.000002176 -0.000003219 -0.000008988 0.000003421 0.000007529 -0.000003587 -0.000003299 0.000023329 -0.000004848 0.000018311 0.000021479 0.000029688 0.000006728 0.000000121 -0.000004982 -0.000001831 -0.000001424 0.000007000 -0.000004350 -0.000015219 -0.000004993 -0.000008780 -0.000005030 0.000000286 -0.000015464 -0.000010768 -0.000019713 0.000003352 0.000004525 -0.000001132 0.000001816 0.000002481 0.000008000 0.000004646 -0.000001261 0.000005646 0.000006580 0.000007108 0.000000400 0.000012792 0.000011936 0.000016093 0.000003874 0.000003423 0.000000978 0.000003715 0.000003790 0.000005504 0.000002301 0.000004492 0.000005646 0.000004927 -0.000002495 0.000002384 -0.000000689 0.000000498 0.000002203 -0.000000577 0.000005206 0.000014864 0.000005606 0.000011604 0.000002634 -0.000001650 0.000002715 0.000001607 0.000001942 -0.000000540 -0.000002881 -0.000005221 -0.000004045 -0.000006603 -0.000010418 -0.000002899 0.000015236 0.000002361 0.000003939 -0.000001358 -0.000003833 0.000002680 -0.000001716 -0.000002460 -0.000062813 0.000011705 -0.000047833 -0.000074138 -0.000099575 -0.000015741 0.000000952 -0.000014896 -0.000030414 -0.000046149 0.000074523 0.000022388 -0.000102588 -0.000034400 -0.000067443 -0.000002559 0.000000798 0.000002272 -0.000000856 0.000000093 -0.000000803 -0.000001978 -0.000004355 -0.000003467 -0.000007387 0.000002592 0.000002022 0.000000450 0.000001942 0.000003347 -0.000000495 0.000000532 -0.000004931 -0.000002462 -0.000003561 0.000000062 -0.000001101 -0.000000408 -0.000001209 -0.000001799 -0.000002178 0.000002901 -0.000003313 -0.000002557 -0.000004079 -0.000525545 -0.000870677 -0.000265637 -0.001045217 0.000521879 0.000063874 0.000185165 0.000030472 0.000352971 -0.000286186 0.000617879 0.000932113 0.000649109 0.000383204 -0.001346382 0.000452418 0.000832469 0.000257465 -0.001482682 -0.001180896 0.000231157 -0.000009222 0.000232212 -0.000197034 -0.000667137 0.000463510 0.000506378 0.000436110 -0.000168120 -0.000523248 0.000011016 -0.000006625 0.000035486 0.000034411 0.000048166 0.000002543 -0.000004250 0.000025670 0.000028625 0.000045889 -0.000027951 -0.000009807 0.000055930 0.000027347 0.000048281 0.000035743 -0.000006576 0.000011476 0.000027975 0.000032786 0.000030239 0.000010921 -0.000023793 0.000011858 0.000016056 -0.000058417 -0.000013355 0.000056608 0.000009659 0.000023585 0.000001463 0.000003035 -0.000005419 0.000001029 -0.000007178 -0.000001790 -0.000002150 0.000001660 -0.000001420 0.000003569 0.000004288 0.000000675 0.000011064 0.000008773 0.000003847 -0.000005743 -0.000004563 0.000004608 -0.000002386 0.000013742 -0.000008076 0.000004182 -0.000012281 -0.000006870 0.000000063 0.000002467 0.000002916 -0.000009644 -0.000001094 -0.000010201 0.000005117 -0.000001348 0.000011185 0.000007191 0.000001826 -0.000004931 0.000003521 -0.000013248 -0.000006457 -0.000001476 -0.000001055 -0.000000056 -0.000002749 -0.000000860 0.000001171 0.000000121 0.000001380 -0.000004862 -0.000000534 -0.000002937 -0.000005386 -0.000000017 -0.000007824 -0.000005704 0.000002516 0.000001659 -0.000001689 0.000005617 0.000003226 0.000003792 0.000001517 0.000000216 0.000000248 0.000000070 -0.000003063 0.000000460 -0.000000807 0.000003837 0.000001519 0.000001247 -0.000001209 0.000000299 -0.000001748 -0.000002022 -0.000000932 -0.000001206 0.000000843 -0.000004344 -0.000002682 -0.000001769 -0.000000431 0.000000156 -0.000001024 -0.000000752 -0.000000175 0.000000644 -0.000000515 0.000002869 0.000000666 -0.000000381 -0.000000886 0.000003176 -0.000009835 -0.000003373 -0.000005168 0.000005078 -0.000000739 0.000008461 0.000004772 -0.000001765 -0.000001475 -0.000002176 0.000004932 0.000001704 0.000007211 -0.000004206 0.000000203 -0.000006523 -0.000004191 0.000002646 -0.000000829 0.000000568 -0.000004247 -0.000002285 0.000000118 0.000003018 0.000000200 0.000005886 0.000004559 -0.000000363 -0.000000519 -0.000000527 0.000001565 -0.000000077 0.000000739 -0.000002136 -0.000000320 -0.000002746 -0.000001862 0.000001832 0.000001644 -0.000000390 -0.000000231 -0.000000322 -0.000003289 -0.000000781 0.000000420 -0.000002380 -0.000001385 -0.000001130 -0.000001261 0.000000728 -0.000003531 -0.000001828 -0.000000752 0.000000833 -0.000000486 0.000002149 0.000000500 -0.000000583 0.000008979 -0.000003328 0.000017862 0.000008609 0.000000549 -0.000002738 -0.000002840 0.000007474 0.000001074 0.000007992 0.000000252 -0.000002525 0.000009041 0.000002028 0.000001654 0.000002014 0.000001064 0.000004337 0.000002150 -0.000000637 -0.000001114 0.000003109 -0.000003195 -0.000001109 -0.000002022 0.000002297 0.000002254 -0.000002370 0.000000630 -0.000000812 -0.000004086 0.000000866 -0.000005707 -0.000003215 0.000001796 0.000002394 0.000001929 -0.000004475 -0.000000448 -0.000005542 0.000000228 0.000001636 -0.000003282 0.000000121 0.000001776 0.000001869 0.000001003 0.000000251 0.000001021 -0.000000024 0.000002583 -0.000000605 0.000000641 0.000001314 -0.000000555 0.000002307 0.000000909 0.000000579 0.000001982 0.000002054 0.000003063 -0.000000314 0.000005064 0.000002785 0.000000531 0.000000116 -0.000000421 0.000002655 0.000000745 0.000000509 0.000000071 -0.000001009 0.000002280 -0.000000061 -0.000002688 0.000001396 0.000000137 -0.000003515 0.000000121 -0.000000030 0.000001058 0.000000276 0.000000164 0.000000757 0.000000098 -0.000000023 -0.000000495 -0.000000286 -0.000000668 -0.000001331 0.000000084 0.000000276 -0.000003279 -0.000001149 -0.000001124 -0.000003765 -0.000001592 0.000004487 -0.000000841 0.000003581 -0.000000659 0.000000374 0.000001049 0.000000721 0.000002878 0.000004276 0.000000591 -0.000000893 0.000001774 -0.000001667 0.000000143 0.000001455 -0.000001873 -0.000000518 -0.000001367 0.000001517 0.000001727 -0.000001553 0.000001205 0.000000270 -0.000000061 -0.000000033 0.000002858 0.000000785 0.000000584 -0.000000969 0.000000988 -0.000002553 -0.000000708 0.000000272 -0.000000268 -0.000000842 0.000000048 -0.000000892 -0.000001268 0.000000323 0.000000363 -0.000001971 -0.000000053 0.000000074 0.000000070 0.000000400 -0.000004148 -0.000000655 0.000000115 -0.000000308 -0.000000367 -0.000001296 -0.000001119 -0.000001349 0.000013971 0.000018300 -0.000154443 0.000185363 0.000225305 0.000014943 0.000015074 0.000108401 0.000002665 0.000220375 0.000003146 0.000038597 -0.000087424 0.000133431 0.000104722 -0.000005727 0.000006487 0.000021059 -0.000017765 -0.000043205 -0.000004636 -0.000021740 -0.000023736 -0.000002326 -0.000074634 0.000001108 -0.000004358 -0.000003114 0.000044931 -0.000023724 -0.000006240 0.000004593 0.000006638 0.000001179 -0.000056659 -0.000003998 0.000012380 -0.000061429 -0.000017439 -0.000090452 -0.000003005 -0.000015385 -0.000080868 0.000003311 -0.000055284 -0.000006004 -0.000007666 0.000024892 0.000021091 0.000042607 -0.000002435 -0.000005887 -0.000030217 -0.000002079 -0.000062869 -0.000006220 0.000002490 -0.000007569 -0.000056581 -0.000076994 -0.000055688 -0.000381188 -0.000006411 0.000356483 0.000317025 0.000013180 0.000398995 0.000032364 -0.000364899 -0.000270313 -0.000045033 -0.000308882 -0.000123464 0.000189714 0.000037004 0.000009960 0.000020110 -0.000018711 -0.000020897 -0.000062238 0.000029809 0.000017986 0.000073809 0.000037179 0.000060374 -0.000000403 -0.000136429 0.000016115 0.000063592 0.000056938 -0.000002717 0.000046451 0.000054836 -0.000057358 -0.000074212 0.000047100 0.000019519 -0.000031310 -0.000001905 -0.000017022 0.000001383 -0.000095596 0.000004544 0.000040755 0.000029406 0.000009056 0.000017563 -0.000060981 -0.000026410 -0.000068848 0.000003702 0.000034105 0.000040615 0.000027642 0.000060928 0.000020373 0.000104722 0.000036951 -0.000071394 -0.000055573 0.711496684 0.007932644 0.179483700 0.046137833 0.129385514 0.714309798 0.067345530 -0.033401625 -0.028775858 0.739338353 0.008925496 -0.069999107 -0.016040625 -0.003125469 0.179455878 0.023449651 -0.012179962 -0.136217012 -0.075039287 0.137632932 -0.069425390 0.014058061 -0.004514526 -0.363121600 -0.021801492 0.012060436 -0.008794468 -0.004153060 -0.006705638 0.005521461 -0.002427443 -0.003884132 -0.030988148 -0.036501247 -0.016916138 -0.356085064 -0.006853085 -0.038318457 -0.047927354 -0.004257987 -0.015610730 0.005793061 -0.002085115 0.001832852 -0.000718057 -0.089825152 -0.001967184 -0.001420936 0.003899286 0.000316523 -0.093143794 0.001272124 0.003076933 -0.002363541 0.000145727 -0.000420780 -0.052884423 -0.046548815 0.035705685 0.005214528 -0.002853002 -0.047669971 -0.231071435 0.139888427 0.001430999 -0.000680239 0.034829030 0.136194827 -0.169241215 0.006440619 -0.000127684 0.004606886 0.000768025 0.001117168 -0.053799508 0.000663291 -0.001345660 -0.000756762 0.000257618 -0.059291906 -0.001030547 -0.006515249 -0.029497994 -0.005719255 -0.018566884 -0.000350131 -0.000790775 0.000204081 -0.000303807 0.006721352 -0.006085923 0.000236283 -0.000082549 -0.000981105 -0.002349625 -0.013456820 -0.000274190 -0.000989328 -0.000332673 -0.000453208 0.000123279 0.006616511 -0.002739925 0.001069022 0.004491269 -0.001470816 -0.002597722 -0.002823877 0.002984838 0.000126599 0.001210174 0.001178180 0.003564742 -0.000747493 -0.000974120 0.000119461 0.000074222 0.000044914 0.000019235 0.000016287 -0.000117004 -0.000052469 -0.000427956 0.000494014 0.000086368 -0.000029279 -0.000004026 -0.000271995 0.000241903 0.000085008 -0.000053264 -0.000138062 0.000006421 -0.000062400 -0.000041548 0.000020100 -0.000085927 0.000253944 -0.000217325 -0.000050838 -0.000015228 -0.000085844 0.000456695 -0.000383185 -0.000115803 -0.000026902 -0.000037440 0.000006649 -0.000007850 -0.000037933 -0.000001316 0.000005832 0.000012643 0.000040605 0.000002047 -0.000007036 -0.000020043 -0.000020310 -0.000018276 0.000003320 -0.000559711 0.000600437 0.002179761 0.001024853 0.000949756 -0.000011506 -0.000148285 -0.000574729 -0.001035035 -0.000119715 0.001782896 0.000396970 0.000654652 0.000421591 -0.000155526 0.001367624 -0.001330934 0.001014753 0.000327930 -0.000222077 -0.000017633 0.000297708 -0.000476046 0.000468037 0.000272787 -0.002808213 0.000040777 0.000521520 -0.000083261 0.001621010 0.000080716 -0.001508409 0.000355157 -0.001027741 -0.000564044 0.000536953 -0.000660926 0.000021174 0.000294068 -0.000676447 0.001550612 -0.001559541 0.000613270 -0.000558275 -0.001045990 0.000308016 -0.000074874 -0.000053745 -0.000045144 0.000417843 -0.000436136 0.000627202 0.000077367 -0.000585892 0.000310832 -0.000009474 0.000096917 -0.000133907 0.000130603 0.000430423 -0.000043136 -0.000015601 0.000076153 0.000013358 -0.000059532 0.000060431 -0.000060141 0.000007112 0.000077445 -0.000095897 0.000005574 -0.000020155 0.000014257 -0.000005504 -0.000070995 -0.000146269 -0.000342369 0.000453547 0.000101350 -0.000587242 0.000311755 0.000730618 -0.000514093 0.000092075 0.000402197 0.000055458 -0.000059610 -0.000164802 0.000060370 0.000034049 -0.000041333 -0.000030526 0.000049807 0.000013874 -0.000067196 0.000067409 -0.000097513 0.000001739 0.000090937 -0.000074891 0.000044299 -0.000008743 0.000002305 0.000032732 -0.000020432 -0.001060278 -0.000061020 -0.000464963 -0.000708618 -0.000090855 -0.000348464 -0.000283842 0.000023446 -0.000916898 0.000033699 -0.000222820 0.000194698 -0.000127139 0.000451723 -0.000204851 -0.000113113 -0.000017772 -0.000502572 -0.000180593 -0.000010215 0.000135406 0.000009314 -0.000080160 0.000132437 0.000027338 -0.000034872 -0.000212937 0.000253994 -0.000341874 0.000005908 0.000014570 0.000027543 0.000012090 -0.000009864 -0.000000841 -0.000032296 -0.000012216 -0.000021450 -0.000009913 0.000011704 -0.000004921 0.000030362 0.000004553 -0.000012000 0.000003553 -0.000016061 0.000004072 -0.000016206 -0.000008912 0.000007796 -0.000003892 -0.000014292 -0.000013919 -0.000000921 -0.000004913 -0.000001016 0.000021753 0.000014519 -0.000005743 0.000010205 0.000020902 -0.000021209 -0.000011067 0.000022405 -0.000027988 -0.000012169 0.000013633 0.000001704 -0.000000840 0.000008991 -0.000003319 -0.000005670 0.000000856 0.000014790 -0.000029413 -0.000020657 0.000182171 -0.000049968 -0.000284327 -0.000027961 -0.000098960 -0.000445510 -0.000085015 0.000252990 -0.000020173 0.000114174 0.000127980 -0.000203766 -0.000105973 0.000090571 0.000042927 0.000098744 -0.000230906 -0.000002256 -0.000182262 -0.000025371 -0.000240800 0.000139736 -0.000173536 0.000323028 -0.000168915 -0.000041226 0.000251204 0.000014019 -0.000323834 -0.000072171 -0.000131569 0.000098870 0.000064756 -0.000097415 0.000026608 0.000017698 -0.000056315 0.000052033 0.000061302 -0.000031317 -0.000031540 0.000137192 -0.000094724 -0.000134688 -0.000022479 0.000021522 -0.000002569 -0.000024484 0.000014850 0.000007734 0.000006965 0.000005092 0.000002300 0.000005371 -0.000000811 -0.000024665 -0.000006191 0.000010717 -0.000006883 0.000006549 -0.000015886 0.000011631 0.000007547 -0.000031257 -0.000011657 -0.000001162 -0.000000392 0.000011476 -0.000004217 0.000001788 0.000006238 0.000002382 -0.000033115 0.000002543 -0.000001763 0.000019727 -0.000010759 0.000050600 0.000072975 -0.000029985 0.000009320 -0.000014373 0.000018385 0.000029527 -0.000025845 -0.000020190 0.000001485 -0.000048417 -0.000042492 -0.000068561 0.000007080 0.000004141 -0.000020871 0.000029552 -0.000111907 0.000010434 -0.000014201 -0.000017323 0.000014240 0.000010393 0.000002446 -0.000109543 -0.000018661 -0.000000419 -0.000006541 0.000199118 0.000323663 0.000264866 0.000040949 0.000162036 -0.000045784 -0.000201425 -0.000092435 -0.000009050 0.000194359 0.000092247 -0.000051276 -0.000038489 -0.000000974 -0.000155530 0.000015132 0.000064507 -0.000014896 0.000025255 -0.000067844 0.000012104 0.000037984 -0.000015131 0.000007530 -0.000078521 0.000019454 0.000011493 -0.000009917 0.000003613 0.000013312 0.000096209 0.000004533 -0.000072283 0.000157027 0.000089768 0.000081271 -0.000007710 -0.000040064 -0.000041203 0.000189370 -0.000054697 -0.000089515 0.000032825 -0.000320230 -0.000075867 0.000036756 0.000003874 -0.000001981 0.000076749 -0.000175211 -0.000069600 0.000117628 -0.000023248 0.000196196 -0.000049489 0.000092255 0.000054042 -0.000072165 0.000110927 0.000091632 0.000103740 -0.000091811 -0.000039920 -0.000031974 0.000047124 -0.000019633 -0.000021886 -0.000007569 -0.000117379 -0.000201719 -0.000061829 0.000060244 0.000000584 0.000212827 -0.000250856 -0.000635438 0.000112609 0.000222480 -0.000060217 -0.000124040 0.000081143 0.000230432 0.000205270 -0.000160460 0.000112975 -0.000157631 -0.000195094 0.000011225 -0.000186426 -0.000185957 -0.001725820 0.000388471 0.000025110 -0.000736755 0.000071257 0.000540738 -0.000113868 -0.000174493 0.000523209 0.000117545 0.000020636 0.000107530 0.000237755 -0.000093556 0.000144470 -0.000341637 -0.000152218 0.000060447 -0.000328224 0.000084337 0.000317111 -0.000008457 -0.000077434 0.000130190 -0.000195395 -0.000140540 -0.000020078 0.000004353 0.000138954 -0.000007144 0.000005786 0.000001532 -0.000005446 -0.000011035 -0.000004613 0.000004888 0.000002396 -0.000015063 0.000010561 0.000003240 -0.000001419 0.000006100 -0.000000598 0.000006746 0.000009927 -0.000012902 0.000019692 -0.000008514 -0.000012790 0.000004737 -0.000011756 -0.000012873 0.000017210 -0.000007167 -0.000010170 -0.000007764 0.000012903 -0.000040116 0.000017603 0.000948346 0.000070593 0.000084008 0.000388188 -0.000182589 0.000084905 -0.000468293 -0.000310890 0.000055610 -0.000252810 0.000870113 0.000541000 0.001440178 0.000780157 0.000250127 -0.000054987 -0.000030573 0.000000582 -0.000008904 -0.000132376 -0.000185632 -0.000086098 0.000042840 0.000165528 -0.000036686 -0.000036341 0.000186084 -0.000036024 -0.000244689 0.000290670 -0.000041241 0.000073579 0.000025841 0.000002061 0.000071597 -0.000015211 0.000028781 -0.000015558 -0.000022901 0.000009258 -0.000035033 0.000018462 -0.000004140 0.000046479 -0.000010418 0.000011793 0.000015597 -0.000011063 0.000014247 0.000025155 0.000001174 0.000000318 -0.000008369 0.000002828 0.000004920 -0.000009107 -0.000005315 0.000009751 0.000007471 -0.000009815 -0.000007567 -0.000015621 -0.000008096 -0.000029385 -0.000021787 -0.000003620 -0.000011206 -0.000001472 -0.000006454 -0.000004360 -0.000010051 -0.000012384 0.000004878 -0.000006081 -0.000014871 0.000030072 0.000047864 0.000016162 0.000039489 0.000029733 0.000005183 0.000000875 0.000003778 0.000006207 0.000015769 0.000000325 -0.000005554 -0.000017636 0.000005973 0.000015583 -0.000012302 -0.000017257 -0.000009825 -0.000025497 -0.000006402 0.000005110 0.000021326 0.000009446 -0.000006727 -0.000004633 0.000006732 0.000010396 0.000004415 -0.000000900 0.000008600 0.000010116 0.000001976 0.000002833 0.000017710 0.000008058 0.000009880 -0.000016018 -0.000006535 -0.000011054 0.000005752 0.000010250 0.000023510 -0.000005480 0.000000111 0.000000476 -0.000000513 -0.000002402 0.000002723 -0.000001782 -0.000007577 -0.000000773 0.000004193 0.000017638 0.000011853 -0.000007687 0.000002714 0.000004607 0.000000795 0.000004546 0.000004913 -0.000001145 -0.000000762 -0.000007032 -0.000003622 0.000005502 -0.000010240 -0.000008156 0.000009863 0.000001517 -0.000017188 -0.000002893 -0.000001822 -0.000001431 0.000000557 0.000000609 -0.000074967 -0.000066212 -0.000021675 -0.000136635 -0.000074996 -0.000039279 -0.000028894 -0.000015035 -0.000030125 -0.000014494 0.000026060 0.000049169 -0.000077819 -0.000023834 0.000120574 -0.000001301 0.000000390 0.000004897 -0.000002070 -0.000003500 -0.000008645 -0.000007300 -0.000006797 -0.000000939 0.000001302 0.000007392 0.000008636 0.000003637 -0.000001716 0.000001333 -0.000002766 -0.000005066 -0.000002374 -0.000005555 -0.000001093 -0.000002301 0.000000396 -0.000004484 0.000005288 0.000002478 -0.000001872 -0.000004930 0.000002839 -0.000011275 -0.000006765 -0.000293536 0.000251366 0.000668328 0.000362330 0.000222934 -0.000006805 0.000123447 -0.000034674 -0.000187075 0.000075170 -0.000488922 -0.000302094 -0.000573608 -0.000186663 -0.000204297 -0.000165442 -0.000005497 -0.000485942 -0.000473121 0.000016459 -0.000393746 0.000107504 0.000064313 0.000020958 0.000167985 -0.000266614 -0.000191685 -0.000513829 -0.000131781 0.000010315 0.000022765 0.000017653 0.000022866 0.000053782 0.000007716 0.000027365 0.000009437 0.000019931 0.000025057 -0.000005053 -0.000000259 -0.000009692 0.000045015 0.000029445 -0.000048586 0.000030284 0.000032800 0.000001254 0.000054057 0.000045213 0.000039003 0.000029158 -0.000014821 0.000014636 0.000038549 -0.000034494 -0.000046776 0.000045249 -0.000010655 -0.000089433 0.000005665 0.000001267 -0.000000524 -0.000011156 -0.000001018 -0.000004148 0.000000529 0.000002211 0.000007902 -0.000000736 0.000005187 0.000007663 -0.000006240 0.000007018 0.000003940 -0.000009338 -0.000003120 0.000003076 0.000025433 -0.000000595 -0.000005504 -0.000010729 0.000006893 -0.000000273 -0.000014230 0.000006471 -0.000008467 0.000003072 -0.000019809 0.000000791 0.000003702 0.000008442 -0.000001951 0.000001944 0.000008919 -0.000002178 -0.000008042 -0.000000546 -0.000003648 -0.000010542 -0.000001214 -0.000004449 0.000002127 -0.000000044 -0.000002336 0.000000841 -0.000002875 0.000001088 -0.000006575 -0.000001961 -0.000005617 -0.000006572 0.000001244 0.000004473 -0.000007698 0.000000548 0.000003617 -0.000000625 0.000005161 0.000003875 0.000001702 0.000001490 0.000000239 -0.000004289 0.000001824 -0.000000188 0.000002184 0.000000476 0.000003181 0.000001620 -0.000000700 -0.000000482 -0.000000693 0.000000289 -0.000001727 -0.000000385 -0.000002134 -0.000001068 -0.000002770 -0.000002428 -0.000000327 -0.000000458 0.000000079 0.000000091 -0.000000892 0.000000224 0.000002211 0.000000101 0.000001005 0.000001700 0.000001557 -0.000004342 0.000000474 -0.000011624 -0.000004974 0.000004933 0.000007703 -0.000003307 -0.000003179 0.000009361 -0.000003886 0.000000138 0.000001996 0.000011253 -0.000000628 -0.000004511 -0.000006050 0.000001446 0.000003716 -0.000006503 -0.000001032 -0.000000243 -0.000000486 0.000000823 -0.000002911 0.000003348 0.000002646 0.000000256 -0.000002931 0.000004975 -0.000000767 0.000001001 0.000000185 0.000003530 -0.000000104 -0.000002672 -0.000001506 0.000000958 0.000004504 -0.000003510 0.000002058 0.000001286 -0.000002746 -0.000004433 0.000002703 -0.000000578 -0.000001290 -0.000000045 -0.000001446 -0.000001641 -0.000000651 -0.000002218 -0.000000675 -0.000001697 -0.000002309 0.000000622 0.000002068 -0.000000447 0.000000620 0.000001627 0.000006446 0.000013486 0.000001170 0.000002507 0.000017909 -0.000003366 0.000007758 0.000001181 0.000025299 0.000002885 -0.000000777 -0.000001553 0.000002008 0.000006812 0.000006071 0.000001042 0.000001535 -0.000000551 -0.000003335 0.000002797 -0.000001528 -0.000005711 0.000002126 -0.000010812 -0.000004952 0.000002630 0.000002388 -0.000002277 -0.000007746 0.000000821 -0.000003906 -0.000005941 0.000003009 0.000002721 -0.000008029 0.000003576 -0.000002033 -0.000002837 -0.000015397 0.000000947 -0.000000618 -0.000001834 0.000003110 -0.000002349 -0.000003187 0.000002372 0.000002491 0.000000263 -0.000002441 0.000002195 0.000002191 0.000002534 -0.000002310 -0.000002193 0.000004013 0.000001343 0.000001909 0.000001543 -0.000000924 0.000001941 0.000001951 0.000004376 0.000000010 -0.000000660 0.000005337 -0.000000195 0.000001219 0.000000424 0.000001832 0.000000959 0.000001148 0.000001534 -0.000002675 -0.000000820 0.000002359 0.000001300 -0.000000537 -0.000000520 -0.000002921 0.000000249 0.000000602 0.000000399 0.000000531 -0.000001379 0.000000741 0.000000473 -0.000000070 -0.000001495 -0.000001006 0.000000455 0.000001326 -0.000000861 -0.000001450 -0.000002937 -0.000000625 -0.000004936 -0.000000077 0.000004835 0.000013339 -0.000003368 -0.000001007 0.000000090 0.000003578 0.000004591 -0.000001695 0.000003945 0.000002035 -0.000002761 -0.000007838 0.000004644 -0.000000369 -0.000002745 0.000001181 -0.000006084 -0.000002306 0.000000977 -0.000000646 0.000001334 -0.000004879 -0.000000500 -0.000000677 0.000000752 0.000001253 0.000001726 0.000000427 -0.000000742 -0.000002077 0.000001106 -0.000001479 -0.000003125 -0.000000220 -0.000000225 -0.000001410 -0.000000052 0.000000430 0.000000587 -0.000000328 -0.000000173 -0.000001500 -0.000000381 0.000000549 -0.000001401 -0.000000446 -0.000001774 -0.000001388 0.000000313 -0.000000596 -0.000001747 -0.000001215 -0.000000134 0.000025656 0.000006086 -0.000266566 -0.000196534 0.000064496 0.000097942 -0.000118575 -0.000042282 0.000041288 -0.000023605 -0.000009441 0.000031407 -0.000083870 -0.000184658 0.000061037 -0.000005793 -0.000022618 -0.000007134 0.000099365 0.000006906 -0.000054182 -0.000005528 -0.000022460 0.000104617 0.000001016 0.000011445 -0.000000501 -0.000021525 0.000020010 0.000015370 0.000018466 0.000029223 0.000033141 -0.000022331 0.000004170 -0.000066067 0.000032617 -0.000001107 0.000024119 -0.000002060 -0.000049234 0.000034413 0.000016393 -0.000024065 0.000040501 0.000031839 -0.000016495 -0.000011849 0.000027419 0.000001091 -0.000054567 0.000032899 0.000036044 -0.000036142 0.000017597 -0.000054902 0.000004007 0.000062472 0.000069607 0.000012054 -0.000371960 -0.000315372 -0.000445858 0.000037506 0.000080866 0.000468732 0.000679090 0.000759209 -0.000063720 -0.000221749 -0.000625876 -0.000127641 -0.000024767 -0.000169304 0.000138891 0.000048378 -0.000053728 -0.000090052 0.000000325 0.000013247 0.000132252 -0.000218059 -0.000277039 0.000048471 0.000011052 -0.000097286 -0.000178175 -0.000308382 0.000214428 0.000090950 0.000005057 -0.000000825 0.000464153 -0.000428121 -0.000107273 0.000067085 -0.000314745 -0.000516803 0.000217987 0.000068003 -0.000093271 -0.000325436 -0.000014028 -0.000498241 0.000055078 -0.000016417 -0.000008681 0.000062681 -0.000076492 -0.000008125 0.000110640 -0.000027083 0.000001776 -0.000069942 -0.000069249 0.000124470 0.000009329 0.000203747 -0.000069772 -0.000070215 0.727095161 0.023448162 0.709372872 -0.013869516 0.009273758 0.173853509 -0.049926456 0.048032141 0.131530389 0.707791461 -0.005050134 0.070781132 -0.030062573 -0.025214243 0.724012194 0.000384921 0.000173443 0.003875536 0.000288421 0.000532579 0.000480272 0.000636213 -0.000659601 -0.000241382 0.001485421 0.000575616 -0.000860999 -0.005892543 -0.029617696 -0.004848754 -0.000210760 -0.000088273 -0.000732544 0.000452121 -0.000144713 0.009886578 -0.005887789 0.000328426 0.000192440 -0.000789688 0.024540690 -0.014058224 -0.000239278 -0.000971419 -0.000389322 -0.059377451 -0.019568281 0.006686925 -0.001879157 0.001561893 -0.301670702 -0.087505682 -0.002210441 -0.001202330 0.003502567 -0.085906473 -0.090486138 0.001146899 0.003036564 -0.002123804 -0.002631325 -0.000828723 -0.049927525 -0.044493756 0.034326801 -0.003616196 -0.003323606 -0.045991651 -0.220934308 0.135113504 -0.002518314 0.000024853 0.035258380 0.134397621 -0.172730712 0.001414571 0.006791988 0.004316156 -0.000852576 -0.006889159 0.009156789 0.023836137 0.000391531 0.000959585 -0.029247226 -0.007031418 -0.013742766 0.000811626 0.001849957 -0.006161586 -0.000049619 0.000010876 -0.000036428 0.000014294 -0.000008748 0.000197258 -0.000268421 0.000110736 0.000258554 0.000147133 0.000129793 -0.000122463 0.000062412 0.000118004 0.000036009 0.000037760 0.000006650 -0.000003996 -0.000038835 -0.000016696 -0.000092559 0.000147981 -0.000068963 -0.000144473 -0.000062442 -0.000239197 0.000236613 -0.000075625 -0.000212624 -0.000050136 -0.000007983 -0.000013916 -0.000001016 0.000000045 0.000003259 0.000012846 -0.000013628 0.000004068 0.000008540 -0.000000970 0.000016681 0.000010780 -0.000000888 -0.000007388 -0.000002950 0.000073745 -0.000463903 0.001563286 -0.000897080 -0.001930260 -0.000063225 0.000563465 -0.000202396 -0.000040011 0.000202235 0.000048781 0.000132928 -0.000191798 -0.000347655 -0.000473643 0.000036046 0.000219129 -0.000670938 -0.000439398 0.000592559 -0.000853121 -0.001193543 -0.001507574 0.000266571 0.001139335 0.000417943 -0.000978261 0.002240055 -0.001256554 -0.001381878 0.000233544 0.000457570 0.000329887 0.000399669 0.000025047 0.000332864 0.000050075 0.000115625 0.000366656 0.000284594 0.000367977 0.001026857 -0.000493137 -0.000028895 0.000438533 -0.000384276 0.000053609 -0.000344001 -0.000262396 -0.000106216 0.000735139 0.000688474 -0.000049873 -0.000472433 -0.000142031 -0.000113849 0.000042090 0.000280986 -0.000052466 -0.000253544 -0.000021697 -0.000052911 0.000071351 0.000014674 0.000005143 -0.000144740 -0.000127370 0.000006849 0.000086293 0.000027870 -0.000018659 -0.000009473 -0.000046939 0.000006303 0.000024024 0.000117515 -0.000429587 0.000185736 0.000253261 0.000152206 -0.000914259 -0.000045961 -0.000099971 -0.000179617 -0.000231778 -0.000283212 0.000050747 -0.000052846 0.000005902 -0.000017272 -0.000018554 -0.000067875 0.000043399 0.000005085 0.000033597 -0.000097307 -0.000101667 0.000047555 0.000073739 0.000015637 -0.000062469 -0.000001539 -0.000002905 0.000058834 0.000018396 -0.000154602 0.000225144 0.000312788 -0.000177261 -0.000552914 0.000289478 0.000782309 0.001187220 -0.000105439 -0.001268113 -0.000096630 -0.000310482 -0.000605291 0.000347972 0.000628194 -0.000192652 0.000392672 -0.000693170 0.000006150 0.000085272 0.000039247 -0.000057649 0.000003390 0.000015119 -0.000081429 0.000054371 0.000077292 0.000441800 -0.000232463 -0.000516159 -0.000011929 0.000013345 -0.000017385 -0.000001740 0.000000833 0.000031453 -0.000002242 0.000019285 -0.000013551 -0.000004674 0.000003087 0.000010281 -0.000018932 -0.000008293 0.000006465 0.000018993 0.000011286 0.000003777 -0.000007704 -0.000004923 0.000002714 -0.000002051 -0.000006938 0.000002623 0.000002118 0.000006395 0.000015774 0.000005651 -0.000004134 -0.000003810 -0.000027882 -0.000024192 -0.000006001 0.000026319 0.000011276 0.000012993 0.000002998 -0.000002783 -0.000003881 0.000000286 -0.000026423 -0.000039857 0.000014362 0.000021761 0.000008614 0.000016086 0.000189181 -0.000032007 -0.000078232 -0.000004164 0.000134272 -0.000095518 0.000085202 0.000148798 0.000050268 0.000040577 0.000203145 -0.000051984 -0.000138253 -0.000089929 0.000825224 0.000248636 -0.000088673 -0.000144778 -0.000033897 -0.000214445 0.000026718 -0.000024035 0.000025673 0.000054879 0.000379647 -0.000240436 0.000084757 0.000151612 0.000140178 0.000095221 -0.000104602 0.000032685 0.000098124 0.000067046 -0.000070715 -0.000020754 -0.000012376 -0.000012512 -0.000016160 0.000111621 -0.000083268 0.000010095 0.000019879 0.000057743 0.000045057 0.000016743 -0.000008179 -0.000022447 -0.000004019 -0.000007687 0.000002250 0.000016044 0.000007160 -0.000004504 0.000007129 -0.000016910 -0.000013150 0.000002161 0.000005855 0.000002176 -0.000028214 0.000021909 0.000013807 0.000007137 -0.000009642 -0.000008725 -0.000000616 0.000007821 0.000006830 0.000015076 0.000020288 -0.000010935 -0.000036543 -0.000002597 -0.000080771 0.000012802 0.000053372 0.000065971 0.000003664 0.000030304 -0.000009577 -0.000041388 0.000003348 -0.000004992 0.000048491 0.000005905 -0.000051074 -0.000040970 0.000009706 -0.000045678 0.000018657 -0.000052045 -0.000013579 0.000119630 -0.000003371 0.000001847 -0.000032650 0.000016098 0.000047869 -0.000101081 0.000080399 -0.000239550 -0.000022849 0.000134917 0.000154132 -0.000363187 -0.000072316 0.000278145 -0.000132931 -0.000213769 0.000208020 -0.000072384 0.000029135 -0.000126173 -0.000155892 0.000013433 -0.000287065 0.000057366 0.000238770 0.000061149 -0.000012783 -0.000005435 0.000025052 0.000049275 0.000024007 -0.000004976 0.000016882 -0.000017010 0.000051985 0.000029638 0.000001476 -0.000086207 -0.000039857 0.000092624 0.000030632 0.000027279 -0.000025035 -0.000000239 -0.000007083 -0.000079545 0.000116250 -0.000006983 -0.000040461 -0.000004468 -0.000139490 0.000140507 -0.000003459 -0.000169950 -0.000115684 0.000027054 -0.000107976 0.000013477 0.000080222 0.000019514 0.000103806 -0.000187363 -0.000001979 0.000144852 0.000030972 0.000009034 0.000043477 0.000001840 0.000021217 0.000035238 -0.000032759 0.000141549 -0.000023249 -0.000082206 -0.000054747 -0.000043502 0.000053173 0.000009121 -0.000090774 -0.000025776 0.000138072 -0.000238752 -0.000007256 0.000140130 0.000011488 -0.000002976 -0.000462115 0.000282971 0.000096686 0.000213945 -0.000025104 -0.000115293 -0.000027958 0.000318915 0.000205462 -0.000067443 0.000084834 -0.000062075 -0.000091061 -0.000167124 0.000158029 -0.000191853 0.000005193 0.000135665 0.000228061 0.000057910 -0.000014140 0.000005000 -0.000170440 -0.000024339 -0.000245314 -0.000008201 0.000026034 0.000142122 0.000021668 -0.000048900 0.000065396 0.000067373 -0.000141670 -0.000154802 0.000111933 0.000248312 -0.000020797 -0.000060135 -0.000086196 0.000235198 -0.000157119 0.000043999 -0.000010115 0.000108759 0.000007185 -0.000008942 -0.000003371 -0.000000506 -0.000008176 -0.000002035 0.000002810 -0.000003169 0.000000853 -0.000006219 -0.000000503 0.000002120 0.000002559 -0.000006163 0.000007850 -0.000000984 -0.000015032 -0.000008054 -0.000018541 -0.000003384 -0.000012118 0.000005814 0.000002811 0.000010159 0.000010261 0.000017965 0.000014675 -0.000005373 -0.000009088 -0.000019358 -0.000250774 -0.000404263 -0.000563102 -0.000282070 0.000093791 -0.000468605 -0.000302097 0.000064044 -0.000201449 0.000501269 0.000167360 -0.001317302 -0.000362732 0.000275741 0.000277663 0.000221914 -0.000048373 -0.000019242 -0.000199004 0.000036613 -0.000007371 -0.000037770 0.000049158 0.000033114 0.000094876 0.000055396 0.000141586 -0.000144684 0.000042722 0.000061745 -0.000066224 -0.000060333 0.000012241 0.000056637 0.000032191 -0.000006738 0.000002358 0.000001092 0.000008765 0.000014689 0.000021243 -0.000029616 0.000011789 0.000048016 0.000010410 0.000024764 0.000003863 0.000004018 0.000001741 -0.000003494 0.000021276 0.000006861 -0.000000889 -0.000000014 -0.000002312 0.000017541 -0.000003813 0.000000367 0.000004856 0.000003643 -0.000012410 0.000011093 -0.000005513 -0.000007233 0.000003945 0.000001476 0.000002422 -0.000001463 -0.000001389 0.000000744 -0.000009790 -0.000003332 -0.000001756 -0.000001661 0.000003047 -0.000010522 -0.000015151 0.000007132 0.000014522 -0.000001565 0.000007245 -0.000000930 0.000001688 -0.000000028 -0.000002910 0.000019857 0.000008162 0.000001767 -0.000002988 -0.000004920 0.000008608 0.000013367 -0.000001911 -0.000011050 -0.000001741 -0.000011887 0.000005218 -0.000002876 -0.000001973 -0.000000506 -0.000019518 -0.000006738 0.000002251 0.000000701 0.000000086 -0.000014872 -0.000007540 0.000002539 0.000006849 0.000003313 -0.000011043 0.000002252 -0.000001965 -0.000000605 -0.000000614 -0.000012027 0.000001421 -0.000000703 0.000000840 -0.000000670 -0.000009894 -0.000002564 -0.000000503 0.000001091 0.000000762 -0.000024390 -0.000020847 0.000002628 0.000006582 0.000002386 0.000002124 -0.000001483 0.000000809 0.000001826 -0.000000921 0.000016375 0.000009711 -0.000001799 -0.000003007 -0.000001249 -0.000003411 -0.000012132 0.000001953 0.000004034 0.000005670 0.000009073 -0.000000157 0.000000932 0.000000983 -0.000000697 0.000042949 0.000085567 -0.000034337 -0.000051178 0.000004524 0.000030530 0.000011030 -0.000000905 -0.000019956 -0.000000482 0.000047010 0.000053159 0.000004795 -0.000046237 -0.000045685 -0.000003074 0.000002838 -0.000001887 -0.000000440 0.000001520 0.000010024 -0.000003245 0.000002960 -0.000002825 0.000000249 -0.000007357 0.000003607 -0.000002112 0.000000190 -0.000001238 0.000001207 0.000000660 0.000000218 -0.000001738 -0.000001034 0.000007677 -0.000006116 0.000002056 0.000000619 -0.000001027 -0.000007538 0.000005992 -0.000002388 -0.000003819 0.000000218 0.000268349 -0.000555527 -0.001234722 0.001214903 0.000215880 0.000109305 0.000157676 0.000700355 -0.000565800 0.000062012 -0.000069799 0.000522772 0.000511633 -0.000026193 0.000127237 0.000132400 0.000745073 0.000305574 0.000000752 -0.000503573 0.000249468 0.000022008 -0.000085637 0.000109764 -0.000198351 0.000098244 0.000395828 -0.000128921 0.000112234 -0.000321094 -0.000026570 -0.000042321 0.000012193 0.000025827 0.000007214 -0.000028262 -0.000014995 0.000000846 0.000021486 0.000005185 -0.000035112 -0.000035253 -0.000000365 0.000029566 0.000022995 -0.000008336 -0.000034866 0.000019512 0.000017264 -0.000006736 -0.000020886 0.000010675 -0.000001996 0.000001487 -0.000012473 -0.000019422 -0.000021205 -0.000006850 0.000019105 0.000030912 0.000000435 0.000012133 -0.000002309 -0.000007337 0.000000245 -0.000001475 -0.000009335 0.000000673 0.000004601 0.000000800 0.000003612 -0.000002085 0.000001321 -0.000003455 0.000004695 -0.000001645 -0.000027386 0.000003912 0.000016383 -0.000000056 -0.000005827 -0.000004782 -0.000001178 0.000002686 -0.000003150 0.000003224 0.000020268 -0.000002186 -0.000010206 -0.000002975 0.000003772 -0.000000443 0.000001883 -0.000002546 0.000004183 -0.000004657 0.000003437 -0.000001956 0.000001613 -0.000005096 -0.000003289 0.000000455 -0.000000235 0.000001313 -0.000000026 -0.000001275 0.000006181 -0.000000920 -0.000003092 -0.000000259 -0.000004823 -0.000005532 -0.000000698 0.000006206 -0.000002490 0.000000503 -0.000003214 0.000001540 0.000002069 0.000001615 0.000001794 0.000003139 -0.000000440 -0.000002940 -0.000000227 0.000000807 -0.000003086 0.000000797 0.000000690 0.000001330 0.000000580 -0.000001200 -0.000000469 0.000000561 -0.000001383 -0.000000153 0.000002142 -0.000001034 -0.000000291 -0.000001987 -0.000000218 -0.000000528 -0.000000053 0.000000324 -0.000000629 0.000001592 -0.000001603 0.000000388 -0.000000418 0.000000633 -0.000002574 0.000010658 -0.000002178 -0.000004320 -0.000002856 0.000005496 0.000004314 0.000000611 -0.000004668 0.000002358 -0.000004070 -0.000010592 0.000001486 0.000006517 0.000002470 -0.000004880 -0.000004910 -0.000000499 0.000005148 -0.000001791 -0.000001896 -0.000001606 0.000000283 0.000001731 -0.000002307 0.000001478 0.000004516 0.000000203 -0.000003911 0.000002813 0.000001167 -0.000003381 0.000000637 0.000001305 0.000000015 -0.000001739 -0.000005020 0.000000610 0.000003426 -0.000001088 0.000003504 0.000004300 -0.000000559 -0.000002506 -0.000000737 -0.000000098 0.000000685 -0.000000407 -0.000000314 -0.000000859 -0.000000502 0.000001460 -0.000000739 -0.000000010 -0.000001314 0.000001751 -0.000000786 0.000000299 -0.000000407 0.000000196 0.000008442 -0.000000725 0.000002119 -0.000003576 0.000003296 0.000010624 -0.000018458 0.000003566 0.000009101 -0.000001076 0.000008334 -0.000006573 0.000001823 0.000001713 0.000000766 -0.000000543 0.000002579 -0.000000249 -0.000002750 0.000001217 -0.000009017 0.000004861 -0.000001949 -0.000003251 0.000000687 -0.000005895 0.000005613 -0.000001379 -0.000002883 0.000000106 -0.000005938 -0.000004772 -0.000000013 0.000004238 -0.000001614 -0.000002113 0.000013818 -0.000002702 -0.000006429 -0.000000270 -0.000009420 0.000000943 -0.000000461 0.000000023 0.000000909 -0.000002148 0.000002140 -0.000000593 -0.000001590 0.000000307 0.000001061 0.000003334 -0.000000071 -0.000001366 -0.000000006 -0.000005432 0.000000154 0.000000151 -0.000000713 0.000001479 0.000000422 -0.000000197 0.000000531 -0.000001773 0.000001544 0.000001077 -0.000001904 0.000000434 0.000000277 0.000000614 0.000007000 0.000001716 -0.000000229 -0.000001260 -0.000000672 -0.000002835 0.000003363 -0.000000298 -0.000000560 -0.000000090 -0.000001530 0.000001001 0.000000058 -0.000000944 0.000000640 0.000002430 0.000001353 -0.000000237 -0.000000275 -0.000000978 -0.000000599 0.000003252 -0.000000919 -0.000000225 -0.000001138 0.000002595 -0.000013646 0.000002496 0.000005821 -0.000000344 -0.000003820 -0.000005161 0.000000846 0.000002182 0.000000749 -0.000002120 0.000007889 -0.000000857 -0.000003810 0.000000380 -0.000005165 0.000002876 -0.000000799 -0.000002174 0.000000590 -0.000006722 0.000003129 -0.000000594 -0.000002177 0.000001624 0.000000426 -0.000002443 0.000000558 -0.000000032 0.000000808 -0.000004190 0.000000411 -0.000000474 0.000000190 0.000000181 0.000003219 0.000000430 0.000000028 0.000000041 -0.000000927 -0.000001912 0.000001627 -0.000000382 -0.000000224 0.000000040 -0.000002624 0.000002448 -0.000000501 0.000000265 -0.000000459 0.000002048 0.000001800 -0.000000427 -0.000000082 -0.000001197 0.000029815 0.000146759 0.000018131 -0.000074535 0.000125801 -0.000062237 -0.000028225 -0.000050381 0.000049286 -0.000061642 -0.000029625 0.000149309 -0.000005451 -0.000034453 0.000051059 0.000031934 0.000001324 -0.000000307 0.000017620 -0.000010343 0.000077691 -0.000024956 0.000044157 0.000009546 -0.000004022 0.000020231 -0.000004559 0.000034873 0.000019240 -0.000017312 -0.000007130 -0.000012459 0.000001535 -0.000010414 -0.000009369 0.000055065 0.000035383 0.000038746 -0.000026979 0.000000576 0.000041192 -0.000007954 0.000056413 -0.000056341 0.000023125 -0.000005131 -0.000008860 -0.000008688 0.000014974 0.000011382 -0.000004342 -0.000007286 0.000038473 -0.000015334 -0.000014810 0.000026686 -0.000009096 0.000033121 -0.000018728 -0.000011482 0.000257463 -0.000357119 -0.000019489 0.000175830 0.000430325 -0.000314249 0.000375783 -0.000045557 -0.000267045 -0.000347523 0.000048767 -0.000238213 0.000042185 0.000079059 0.000371824 0.000053916 0.000001096 0.000000544 -0.000014740 -0.000052895 0.000061834 0.000008964 -0.000041460 0.000091535 -0.000058785 0.000142768 -0.000145339 0.000025719 0.000083746 0.000088693 -0.000164370 0.000113483 -0.000026373 -0.000041181 -0.000013144 0.000230911 0.000068521 -0.000011419 0.000049493 -0.000071698 0.000044302 -0.000138805 0.000003496 0.000036302 0.000076908 -0.000006151 0.000020416 0.000029526 -0.000039831 -0.000029131 -0.000020835 0.000067370 -0.000064958 0.000012923 -0.000009169 -0.000094821 0.000138821 -0.000013601 -0.000057267 -0.000080957 0.037107480 0.056665142 0.313426997 0.016434323 0.096900297 0.096065715 0.000270998 -0.000154845 0.000161792 0.044138372 -0.000265753 -0.000483195 0.000667982 0.053950921 0.238797958 -0.000245381 -0.000721056 0.000550840 -0.039151749 -0.147555946 -0.000962751 0.000198979 -0.000077922 -0.004081345 0.000944740 0.000203636 -0.000094639 -0.000030084 0.001123714 0.000031262 -0.000079398 -0.000051407 0.000039452 -0.000361204 -0.000395503 -0.003964163 0.000944827 -0.000203933 -0.000998491 0.000206084 0.000988631 0.000476290 0.000304203 0.000222252 -0.000012257 -0.000258698 -0.000127348 0.001029280 -0.000023112 0.000046340 0.000054737 -0.000037704 -0.000310748 -0.000117505 0.000154572 -0.000009392 -0.000104682 -0.001329655 0.000064901 0.000411120 0.000019389 0.000087821 -0.000381808 -0.000085770 -0.000510707 -0.000004133 0.000013055 -0.000010185 -0.000166478 -0.000099963 -0.000002108 0.000108368 -0.000107001 -0.000469404 -0.000683699 -0.000011061 0.000052163 -0.000033496 -0.000434850 -0.000386620 0.000022991 -0.000022054 0.000018539 0.000281423 0.000168332 0.000012325 -0.000066429 0.000051827 0.000408546 0.000490091 -0.000008569 -0.000097662 0.000065234 0.000747837 0.000717338 0.000014514 -0.000002810 0.000005294 0.000070845 0.000021065 0.000003050 0.000003758 -0.000000638 -0.000025146 -0.000101337 0.000001993 -0.000004247 0.000001920 0.000029465 0.000046552 -0.001112748 0.000345156 0.000290434 -0.000968795 0.000276459 0.000189160 0.000075546 -0.000024951 0.000052166 -0.000151323 0.000145474 0.000002358 -0.000096484 0.000359695 -0.000401252 0.000809927 -0.000328087 -0.000227236 0.000176349 -0.000654615 0.001296400 -0.001576248 0.000035033 -0.000526987 -0.000394154 -0.001479010 0.000433879 0.000338301 -0.001268936 0.000638011 -0.000018515 0.000013910 0.000072976 0.000425780 0.000506719 -0.000097234 0.000522423 -0.000230140 0.000670593 -0.000610899 0.000319101 0.000252603 -0.000254431 0.000739676 -0.000363411 0.000011119 -0.000078242 -0.000058200 -0.000866654 -0.000238018 0.000102267 -0.000285574 0.000136318 -0.000134051 0.001332013 -0.000066267 -0.000105101 0.000052963 -0.000021853 0.000354708 -0.000006737 0.000001596 0.000017598 0.000109469 -0.000003513 -0.000015991 0.000052384 -0.000023371 0.000011398 -0.000222462 0.000018129 0.000012141 -0.000008240 0.000044793 -0.000049261 -0.000008990 0.000042201 -0.000001540 0.000255583 -0.000298286 -0.000039875 0.000011198 -0.000006453 -0.000560165 -0.000266162 0.000013042 0.000013086 -0.000011226 -0.000001555 -0.000052171 0.000008079 -0.000001076 0.000009779 0.000102061 -0.000059807 -0.000033059 0.000059313 -0.000009348 0.000060737 -0.000208282 0.000005538 0.000020419 -0.000015948 0.000010964 -0.000073786 -0.000580582 -0.000499714 0.000055332 0.000003029 0.000174068 -0.001072418 0.001045553 0.000228729 0.000040697 0.000302903 0.000495085 -0.000367103 -0.000266302 0.000059674 -0.000181325 0.000129537 0.000339664 -0.000129136 -0.000011108 -0.000098815 0.000091927 0.000062630 -0.000079750 -0.000023116 -0.000045727 -0.000369392 -0.000148486 0.000283634 -0.000003020 0.000106731 0.000002279 0.000000487 -0.000002427 -0.000032421 -0.000007186 -0.000006148 -0.000005344 0.000007361 0.000029026 0.000050360 0.000003426 -0.000003920 -0.000000936 -0.000031397 0.000018744 0.000001689 -0.000005736 0.000003458 0.000022927 0.000039602 0.000002589 0.000001025 -0.000001537 0.000011493 0.000004443 0.000002423 -0.000007200 0.000003811 -0.000003920 0.000021444 0.000001457 0.000013770 -0.000007116 0.000019263 -0.000050031 0.000001610 -0.000005328 0.000001878 -0.000009884 0.000006816 -0.000007839 0.000013573 0.000000181 0.000021901 -0.000034347 -0.000001962 -0.000026761 0.000018184 -0.000239121 0.001034379 0.000016102 0.000025796 -0.000008648 0.000891724 -0.000502504 -0.000009469 -0.000010223 0.000004795 -0.000133453 0.000046286 0.000004109 -0.000015151 0.000001364 0.000008419 -0.000002850 0.000003155 0.000017586 0.000002898 0.000065411 0.000094027 0.000007799 0.000020386 -0.000004474 0.000003361 -0.000022117 0.000005242 0.000015800 -0.000007512 0.000082631 -0.000080962 -0.000001768 0.000000286 -0.000003028 -0.000036505 -0.000037329 -0.000008012 0.000004718 -0.000000517 -0.000096840 0.000013521 -0.000000338 -0.000005462 0.000004541 -0.000004459 0.000044149 -0.000008128 0.000004674 0.000002390 -0.000006472 0.000003872 -0.000001572 0.000008660 -0.000004369 0.000002655 -0.000032749 -0.000018497 0.000025542 0.000004519 0.000025723 -0.000046771 0.000006095 -0.000004065 -0.000001547 0.000010396 -0.000010347 -0.000000778 -0.000006598 0.000007353 -0.000021299 0.000042034 -0.000000226 -0.000007553 -0.000009311 -0.000015166 -0.000010585 0.000011373 -0.000011350 -0.000004829 -0.000003371 0.000013427 0.000013539 -0.000004783 -0.000000089 0.000010339 0.000023255 0.000042657 -0.000075169 0.000006963 -0.000003820 0.000026963 -0.000041882 0.000019004 0.000023722 -0.000009703 0.000002320 0.000160351 -0.000089322 -0.000090839 0.000004997 -0.000010216 -0.000044016 0.000031067 0.000049074 0.000002287 -0.000020878 0.000211643 -0.000176933 -0.000146498 0.000003800 0.000001199 0.000205484 -0.000115775 -0.000069107 0.000011813 -0.000033150 -0.000141586 0.000070205 0.000069249 -0.000004663 0.000015501 -0.000050748 0.000003753 0.000036397 0.000007547 0.000012584 -0.000029580 0.000041608 0.000055181 0.000001652 -0.000003737 -0.000003074 0.000008555 0.000004898 -0.000072051 0.000101100 -0.000038960 -0.000010807 -0.000000987 0.000036691 0.000171266 0.000032349 -0.000012779 -0.000001547 0.000060526 -0.000164071 0.000018473 0.000011810 0.000002129 -0.000027936 -0.000026066 0.000091901 0.000028803 0.000024369 -0.000047921 -0.000024481 0.000016426 0.000014619 0.000001477 0.000005875 0.000026714 0.000019307 0.000004498 -0.000004038 0.000026216 0.000039614 0.000022021 0.000001076 0.000013661 0.000016695 -0.000020954 0.000140293 0.000042164 0.000027798 -0.000068146 -0.000028080 -0.000078701 -0.000083201 -0.000063062 -0.000001455 -0.000141915 0.000195514 0.000005232 0.000040323 -0.000051701 -0.000175601 0.000048632 -0.000037562 -0.000028544 0.000084214 -0.000051583 -0.000023958 -0.000002285 0.000001688 0.000180634 -0.000039365 -0.000041856 -0.000012895 0.000011211 0.000023864 0.000084560 -0.000165582 -0.000035151 -0.000049491 -0.000074602 0.000042005 0.000047509 0.000000851 0.000008240 0.000152932 -0.000092899 0.000072680 0.000022191 0.000002670 -0.000079228 0.000071910 -0.000067867 -0.000009640 -0.000003107 0.000030321 0.000103811 0.000014844 -0.000003513 0.000007624 0.000002259 0.000001634 0.000013236 0.000002379 0.000004262 0.000003423 0.000020191 -0.000012565 -0.000002061 -0.000001217 -0.000000320 0.000018311 -0.000021251 -0.000012795 0.000005078 0.000018852 0.000010444 -0.000019889 0.000003471 -0.000009682 -0.000007748 -0.000010090 0.000052708 0.000007693 0.000014286 0.000001525 0.000007102 -0.001520973 -0.000287861 -0.000169565 0.000199771 0.000093405 -0.001404568 -0.000578787 -0.000236828 0.000234049 0.000037843 -0.000931222 -0.000487889 0.000847009 -0.000148289 -0.000074683 0.000026715 0.000021410 0.000016510 0.000020810 0.000043623 -0.000063483 -0.000016654 -0.000017229 0.000027507 -0.000022380 0.000005228 0.000009280 -0.000004459 0.000001754 0.000039926 0.000020563 0.000012958 0.000003431 -0.000069819 0.000003887 0.000014730 0.000005911 0.000003715 0.000001473 0.000027289 0.000000676 0.000003041 -0.000004369 -0.000057100 -0.000044236 -0.000008379 0.000001737 -0.000002664 -0.000039235 -0.000033514 -0.000000195 -0.000000728 -0.000001170 -0.000002606 -0.000012031 0.000003820 0.000000866 -0.000000391 0.000002042 -0.000025934 0.000003955 -0.000003176 0.000002522 0.000048878 0.000074880 0.000001675 -0.000001146 0.000000470 0.000021302 0.000018974 0.000004862 -0.000001300 0.000001427 0.000032257 0.000018681 -0.000013685 0.000009965 -0.000005982 -0.000104060 -0.000103026 -0.000002285 0.000000034 -0.000000968 -0.000024784 -0.000023864 -0.000001974 -0.000002137 -0.000000138 0.000004720 -0.000004908 0.000002704 -0.000006891 0.000003240 0.000046427 0.000070975 -0.000001235 0.000000107 -0.000000457 -0.000013797 0.000021829 -0.000003632 0.000001783 -0.000000211 -0.000027624 -0.000006387 -0.000005031 0.000005255 -0.000002855 -0.000017997 -0.000038351 -0.000002954 0.000000777 -0.000001164 0.000006544 0.000015760 -0.000004002 0.000001577 -0.000000587 -0.000020907 0.000006951 0.000001227 0.000000335 0.000000294 0.000006790 0.000006053 0.000000817 0.000003124 0.000000388 -0.000008451 -0.000032209 -0.000001729 0.000000542 -0.000001065 -0.000009998 -0.000010230 0.000000346 -0.000001703 -0.000000287 0.000000457 0.000008487 0.000002631 0.000000810 0.000001441 0.000018107 -0.000003300 0.000000327 -0.000000882 -0.000000308 0.000003464 0.000000832 0.000035951 -0.000034338 0.000011764 0.000210052 0.000369668 0.000010398 -0.000013904 0.000007620 0.000075306 0.000092813 -0.000016825 -0.000018845 0.000001883 -0.000089982 0.000057258 0.000001182 -0.000000302 -0.000000455 0.000002752 0.000007106 0.000000531 -0.000001730 0.000002118 0.000010783 0.000004053 -0.000001012 0.000000666 -0.000000890 -0.000011626 0.000001882 0.000001014 -0.000001200 0.000000872 0.000009125 0.000011256 0.000000553 0.000000159 0.000001145 -0.000006714 -0.000016949 0.000001314 -0.000001803 0.000000886 0.000019480 0.000030769 0.000546430 -0.000077766 0.000250518 -0.000113133 -0.000074707 0.000156913 0.000021917 0.000138719 -0.000084443 -0.000000189 0.000322752 0.000084618 -0.000531240 0.000123469 0.000073501 0.000989888 0.000712303 0.000089502 -0.000115795 -0.000042535 0.000709041 0.000054510 -0.000091304 -0.000104084 0.000004145 0.000669763 0.000216722 -0.000405423 0.000000944 0.000005188 -0.000010841 0.000016440 -0.000003912 -0.000066710 -0.000149127 -0.000006094 0.000013114 -0.000006350 -0.000038660 -0.000074329 0.000003728 0.000014506 -0.000003098 0.000007704 -0.000080390 -0.000018186 0.000011650 -0.000003581 -0.000094764 -0.000147530 -0.000010313 0.000005611 -0.000005604 -0.000069525 -0.000038985 0.000016731 0.000005551 0.000002128 0.000100852 0.000030467 -0.000005978 -0.000003242 -0.000000438 0.000016801 0.000034566 0.000004081 0.000001184 0.000000597 -0.000003069 -0.000019435 -0.000009980 -0.000000561 -0.000001609 -0.000021903 -0.000002642 0.000010323 0.000005369 0.000000895 -0.000022399 -0.000078607 0.000009485 0.000000540 0.000001425 0.000023300 -0.000012590 -0.000005030 -0.000004070 -0.000000778 0.000025989 0.000045124 -0.000007475 0.000000339 -0.000000705 -0.000018495 -0.000003519 0.000007196 -0.000000018 0.000000247 0.000015468 0.000006277 0.000001652 0.000000216 -0.000000391 0.000008891 0.000002391 -0.000000930 -0.000001324 -0.000000044 0.000012254 0.000018081 0.000008607 0.000001192 0.000000545 0.000008771 -0.000012397 -0.000001441 0.000001438 -0.000000745 -0.000011839 -0.000012233 -0.000002197 -0.000001101 0.000000329 0.000002290 0.000009729 -0.000001052 0.000000393 0.000000036 -0.000005814 -0.000008017 0.000001598 -0.000000300 0.000000470 0.000000238 -0.000001785 0.000002011 -0.000000514 0.000000241 0.000005365 0.000006357 0.000000710 -0.000000026 0.000000168 0.000000797 -0.000000997 -0.000001123 -0.000000091 0.000000297 -0.000004029 -0.000003490 0.000001700 -0.000001532 -0.000000037 0.000019499 0.000028879 -0.000006691 -0.000000350 -0.000000372 -0.000014261 0.000007949 0.000002417 0.000002313 -0.000000016 -0.000009827 -0.000027295 0.000006575 0.000000969 0.000000402 0.000007710 -0.000010194 0.000003030 0.000000394 0.000000370 -0.000000543 -0.000004120 -0.000005448 -0.000000384 -0.000000710 -0.000003177 0.000009505 0.000000526 0.000000429 0.000000215 -0.000004226 -0.000009975 0.000003301 0.000000551 0.000000298 -0.000000110 -0.000011887 -0.000002136 -0.000001107 -0.000000100 0.000001092 0.000012312 0.000000917 -0.000000462 0.000000237 0.000003920 0.000003442 0.000001691 -0.000000320 0.000000085 0.000004553 0.000004243 -0.000001133 -0.000000136 0.000000112 -0.000003537 -0.000001954 -0.000011159 -0.000000181 -0.000000663 -0.000029950 -0.000008540 0.000003623 0.000003418 0.000000198 -0.000035220 -0.000074343 -0.000001702 0.000000960 0.000000215 -0.000000825 -0.000027952 -0.000002271 -0.000000114 0.000000290 -0.000000219 0.000007468 0.000000784 -0.000001401 0.000000502 0.000020306 0.000030683 -0.000001161 -0.000000462 -0.000000067 -0.000002365 0.000022479 0.000005069 0.000000300 0.000000091 0.000010832 -0.000004794 -0.000002824 -0.000002066 -0.000000407 0.000014887 0.000043588 0.000001447 0.000000285 0.000000115 0.000005917 0.000008529 -0.000001493 -0.000000164 -0.000000042 -0.000002848 0.000005635 -0.000002405 -0.000000494 -0.000000411 -0.000003327 0.000008516 -0.000000937 0.000000551 0.000000149 -0.000003003 0.000001619 -0.000003105 0.000000119 0.000000092 -0.000008137 -0.000000314 -0.000000501 0.000000260 0.000000090 -0.000003511 -0.000005715 -0.000002074 -0.000000861 -0.000000231 -0.000002887 0.000002372 -0.000000426 -0.000000257 -0.000000330 0.000003889 0.000010511 -0.000000750 0.000000001 0.000000069 0.000000640 0.000003547 -0.000000429 -0.000000524 -0.000000275 0.000001015 0.000003842 0.000000220 -0.000000439 -0.000000481 0.000004231 0.000009958 0.000003394 0.000001453 0.000000551 -0.000007664 -0.000038519 0.000001101 0.000000955 0.000000232 -0.000002266 -0.000013379 -0.000003519 -0.000000881 -0.000000435 0.000001611 0.000023531 0.000000065 -0.000000711 0.000000342 0.000010748 0.000017170 -0.000000801 -0.000000077 0.000000309 0.000005199 0.000013366 -0.000000276 0.000000330 0.000000331 -0.000002708 -0.000006697 0.000001168 -0.000000097 0.000000167 0.000005837 0.000005504 -0.000000025 -0.000000424 -0.000000164 0.000000562 0.000000940 0.000000011 -0.000000118 -0.000000111 0.000001961 0.000005234 0.000000703 -0.000000109 -0.000000265 0.000004307 0.000007132 0.000000152 -0.000000493 -0.000000302 0.000002034 0.000004744 -0.000004262 0.000009374 -0.000017316 0.000038256 0.000034943 0.000022352 -0.000005231 0.000010901 0.000089053 -0.000113496 -0.000021208 0.000040478 -0.000010978 -0.000063558 0.000008904 0.000011605 0.000020524 -0.000027432 0.000006933 -0.000008830 -0.000020254 0.000037102 -0.000016968 0.000032104 0.000003325 -0.000036376 0.000043419 -0.000014061 0.000014867 -0.000010369 0.000003015 -0.000008711 0.000004564 -0.000006655 0.000021534 -0.000017014 0.000022128 -0.000025814 0.000006909 0.000024310 -0.000026903 -0.000004201 0.000001734 -0.000008328 0.000056640 0.000004055 0.000003063 -0.000004556 0.000004649 -0.000017085 -0.000039316 0.000009098 0.000005361 -0.000024107 0.000021565 -0.000008091 -0.000004733 -0.000006776 -0.000004583 0.000013563 0.000009556 -0.000053702 -0.000012217 0.000044180 0.000238889 0.000001671 -0.000024248 -0.000002100 -0.000195882 -0.000406465 -0.000052091 -0.000066371 0.000017652 -0.000394593 0.000266895 0.000003526 0.000011523 0.000002694 0.000068776 0.000055409 0.000041116 0.000047159 -0.000015887 0.000160990 0.000028411 0.000012334 -0.000003942 -0.000002235 0.000090493 0.000168297 0.000005479 -0.000031535 0.000014844 -0.000847823 0.000459991 0.000025754 0.000040795 -0.000015152 0.000547301 0.000527748 -0.000003035 -0.000010343 0.000003031 -0.000829909 0.000333072 -0.000012391 0.000007439 0.000012950 0.000089975 0.000013479 0.000029857 0.000003093 -0.000006003 0.000113016 0.000046950 -0.000000039 -0.000011806 0.000000147 0.000121969 -0.000020611 0.178016180 -0.000143968 0.042759920 0.000272472 0.065165357 0.314901553 0.000872305 0.019898760 0.094507022 0.090943788 -0.000026140 0.000037348 -0.000194332 0.000233271 0.039035917 0.000068394 -0.000247053 -0.000694591 0.000909135 0.050679070 0.000028712 -0.000147899 -0.000463459 0.000386915 -0.037478781 0.000297331 -0.003869360 0.001108841 -0.000381125 -0.003975484 0.001018427 0.001165039 0.000583602 -0.000654238 0.001163188 -0.000681633 -0.000180214 0.000069701 0.000847115 -0.000246911 -0.000049599 -0.000024069 0.000005861 0.000022406 -0.000014464 0.000360256 -0.000032281 -0.000016644 0.000224269 -0.000010360 0.000307499 -0.000030091 -0.000022038 0.000130992 -0.000008369 0.000038057 0.000027836 -0.000003829 -0.000050165 0.000016968 -0.000210688 0.000026779 0.000016192 -0.000148932 0.000008947 -0.000514271 0.000055603 0.000038450 -0.000231367 0.000009726 -0.000001201 0.000047804 -0.000009526 -0.000002707 0.000013042 -0.000003371 -0.000006857 -0.000006313 0.000022156 0.000001146 0.000022554 0.000002097 0.000003040 -0.000013113 0.000001920 0.000280411 -0.000281177 -0.000091218 -0.000223579 -0.000097310 -0.000168243 0.000078824 0.000007223 0.000020352 0.000003022 0.000053865 0.000088865 0.000030633 0.000122646 0.000084967 -0.000220541 0.000163166 0.000090116 0.000243476 0.000181382 0.000081249 -0.000217372 -0.000056661 -0.000078470 0.000327303 0.000603514 -0.000495461 -0.000178885 -0.000364149 -0.000186781 -0.000082011 -0.000094316 -0.000019138 -0.000107351 -0.000174252 -0.000321568 0.000513006 0.000169293 0.000399235 -0.000069630 -0.000429078 0.000401495 0.000133280 0.000237154 0.000084961 0.000216480 -0.000336106 -0.000052879 -0.000207419 0.000075013 0.000217325 -0.000620034 -0.000126674 -0.000593159 0.000053232 0.000278815 -0.000451839 -0.000173999 -0.000164627 -0.000081970 -0.000033762 0.000076900 -0.000003030 0.000048423 -0.000010597 -0.000065879 0.000131417 0.000028745 0.000113812 -0.000012692 -0.000052507 0.000085757 0.000025252 0.000027297 0.000021693 -0.000230153 0.000338106 0.000109288 0.000323321 -0.000017991 0.000133390 -0.000141881 -0.000152353 -0.000019026 -0.000017733 -0.000134453 0.000106965 0.000116567 0.000105640 0.000013351 -0.000059317 0.000098499 0.000009871 0.000070713 -0.000008306 -0.000040967 0.000112213 0.000020997 0.000094877 -0.000030719 -0.000033660 0.000046025 0.000017679 0.000017920 0.000007791 0.000139951 -0.000041873 -0.000022592 -0.000060562 -0.000102072 0.000223192 0.000028228 -0.000013628 -0.000036533 -0.000209167 -0.000180027 0.000067481 0.000026973 0.000060527 0.000240040 -0.000035792 0.000027966 0.000016991 0.000052870 0.000115780 -0.000015078 -0.000008106 0.000006408 0.000013235 -0.000012041 0.000083956 -0.000013189 -0.000005690 -0.000042914 -0.000243568 -0.000014295 -0.000004390 0.000003368 -0.000005991 0.000002060 0.000019267 -0.000005280 -0.000003406 -0.000012092 -0.000000517 -0.000009693 -0.000003493 0.000003656 -0.000014290 0.000005958 0.000014042 -0.000006963 -0.000002392 -0.000012377 0.000001420 -0.000000357 0.000007591 0.000003656 -0.000000335 0.000003113 0.000000244 -0.000017120 -0.000006624 -0.000008958 -0.000002635 -0.000016267 0.000035344 0.000008114 0.000027352 -0.000001943 0.000008056 -0.000013725 -0.000002762 -0.000007319 0.000001180 -0.000018266 0.000044326 0.000007375 0.000029830 -0.000005354 0.000132321 0.000077602 0.000024220 -0.000174492 0.000010366 -0.000171483 0.000049248 0.000025978 0.000083183 -0.000009504 0.000229408 -0.000120306 0.000056156 -0.000210531 -0.000008131 0.000110669 -0.000525887 -0.000012524 -0.000289058 0.000001176 -0.000056080 0.000158569 0.000307175 0.000061592 0.000011262 -0.000100332 -0.000053420 -0.000036789 0.000157746 0.000005790 -0.000061088 0.000099115 0.000025253 0.000088322 0.000003599 0.000006495 -0.000028800 -0.000028446 -0.000010128 0.000000219 -0.000009897 0.000095371 0.000029923 0.000047652 0.000003607 0.000008717 -0.000021247 -0.000004811 -0.000013568 0.000003217 0.000001842 -0.000003383 0.000001353 -0.000005321 -0.000007859 -0.000006253 0.000010037 0.000001184 0.000017813 0.000003742 -0.000015533 0.000045462 0.000013397 0.000026292 -0.000012468 -0.000005418 0.000005370 -0.000003711 0.000008262 0.000004528 0.000015179 -0.000009716 0.000005761 -0.000028206 -0.000002293 0.000010217 -0.000040834 -0.000016715 -0.000000376 -0.000001827 0.000005881 -0.000038965 -0.000017919 0.000003072 0.000016519 -0.000012112 0.000024719 0.000007366 0.000000849 0.000015446 0.000003145 -0.000017774 -0.000009398 -0.000011556 0.000021067 0.000006762 -0.000005784 0.000000099 -0.000002240 -0.000001358 -0.000022280 -0.000009723 -0.000006048 0.000006450 0.000068470 0.000028885 0.000019278 0.000015852 -0.000005132 -0.000022512 -0.000010344 -0.000011834 -0.000016154 0.000003485 0.000113256 -0.000026045 -0.000003046 0.000008030 0.000002606 -0.000012564 0.000014754 -0.000001681 0.000002204 -0.000004649 -0.000020459 0.000005487 0.000004392 0.000001123 -0.000002159 -0.000021606 -0.000006379 0.000006099 0.000004356 0.000001700 -0.000015869 -0.000008753 -0.000031670 0.000027455 -0.000008900 0.000000933 -0.000049588 -0.000043339 0.000043232 -0.000029241 -0.000019035 0.000107764 0.000095353 -0.000091552 -0.000012118 0.000011449 -0.000015859 -0.000025591 0.000017511 0.000019980 0.000014409 -0.000009897 -0.000045268 0.000046737 0.000027766 0.000042652 -0.000019696 -0.000037453 0.000040196 -0.000002590 -0.000000719 -0.000012362 0.000018873 -0.000018683 -0.000015865 0.000001517 -0.000000120 0.000002162 0.000001162 -0.000007493 0.000008112 -0.000016466 -0.000072735 0.000077410 0.000043010 0.000053864 0.000020579 0.000026954 -0.000031143 0.000027958 -0.000000780 0.000067321 0.000035059 -0.000041925 0.000033116 0.000093634 0.000050850 0.000036119 -0.000027939 -0.000022788 -0.000082912 0.000050900 0.000008089 0.000001518 -0.000032755 -0.000000403 -0.000037255 -0.000088955 0.000088246 -0.000027191 -0.000019883 -0.000043162 0.000016945 -0.000049132 0.000009181 -0.000019175 0.000079510 0.000095576 -0.000059560 -0.000012171 0.000016488 0.000003890 0.000082489 -0.000083310 -0.000023229 0.000016751 -0.000013126 -0.000007302 0.000020975 -0.000026964 -0.000051349 0.000014753 0.000004124 -0.000003939 -0.000001182 0.000007644 -0.000009276 -0.000006832 0.000008258 -0.000003230 0.000005008 -0.000009466 -0.000008217 0.000006960 -0.000001555 -0.000005868 0.000007529 0.000007996 -0.000009449 -0.000006625 -0.000004337 -0.000003998 0.000000206 -0.000000714 0.000003351 -0.000006450 0.000006040 -0.000003633 0.000006670 -0.000001306 0.000015034 -0.000057559 0.000108538 -0.000106318 -0.000090754 0.000050038 -0.000005425 0.000125918 -0.000102317 -0.000080049 -0.000105955 0.000045454 0.000036292 0.000028159 -0.000038541 0.001263055 -0.000006935 0.000028985 -0.000012587 -0.000009228 -0.000013144 0.000023560 0.000074078 -0.000116948 -0.000003155 -0.000052871 -0.000024618 -0.000036378 0.000009741 0.000016615 0.000031092 -0.000050296 -0.000116032 0.000090519 0.000064054 0.000007548 -0.000020647 -0.000025707 0.000046849 -0.000003450 0.000000981 -0.000011459 0.000001252 -0.000021746 0.000039941 0.000004306 0.000012224 -0.000026954 0.000005221 0.000012973 -0.000007726 0.000003756 -0.000003674 0.000007619 -0.000001567 -0.000000569 -0.000008834 0.000020295 0.000002467 0.000018312 0.000003588 -0.000004162 0.000028649 0.000007233 -0.000021866 0.000004736 -0.000003809 0.000007058 0.000003104 -0.000003745 0.000001624 -0.000013192 0.000017297 -0.000001325 -0.000000660 0.000004918 -0.000008187 -0.000047630 -0.000007714 0.000027955 -0.000013810 0.000006778 -0.000018684 -0.000002043 0.000004056 -0.000002659 0.000023560 -0.000015296 0.000002075 -0.000005658 -0.000002290 0.000006166 0.000013566 0.000006350 -0.000022106 0.000003407 -0.000019464 -0.000001946 0.000000273 -0.000011327 -0.000000860 0.000000374 -0.000013721 -0.000008277 0.000002073 -0.000002914 -0.000006354 -0.000013565 -0.000001800 0.000011665 -0.000004574 0.000006064 -0.000004016 0.000001312 -0.000003640 -0.000002760 -0.000002649 -0.000004417 0.000000717 -0.000003631 -0.000003550 -0.000002466 0.000008951 -0.000002411 -0.000002877 0.000000932 -0.000008708 0.000001452 -0.000012467 0.000011774 0.000000710 -0.000001748 -0.000006153 -0.000000429 0.000005284 -0.000001701 0.000003312 -0.000003774 0.000005243 -0.000002388 0.000000518 -0.000009266 0.000021533 -0.000000398 0.000009217 0.000002820 -0.000000880 0.000000819 0.000001686 0.000004248 0.000000015 -0.000025061 0.000112140 0.000043063 -0.000099034 0.000036945 0.000005691 0.000028856 0.000007015 -0.000017092 0.000011452 0.000083966 -0.000138025 -0.000021578 -0.000048634 -0.000013751 -0.000008915 0.000003432 0.000001681 -0.000001870 0.000001215 0.000009216 0.000001370 -0.000001180 0.000000551 0.000001175 -0.000006258 -0.000003595 0.000000077 -0.000002330 -0.000001361 0.000004510 0.000001874 -0.000000626 -0.000003638 0.000000890 0.000011209 -0.000001660 -0.000003059 0.000005991 0.000000447 -0.000007278 0.000007384 0.000001459 -0.000010148 0.000001444 0.000039903 -0.000023915 0.000060453 0.000007547 0.000442603 -0.000004651 -0.000049052 0.000045442 0.000030019 0.000049320 -0.000047635 -0.000008115 -0.000024322 -0.000001524 -0.000807992 0.000026584 -0.000084195 0.000061675 0.000071721 -0.000265490 -0.000004993 -0.000079888 0.000055393 0.000043317 -0.000154542 -0.000023252 -0.000046428 0.000015643 0.000036587 -0.000507070 -0.000001870 -0.000019558 -0.000014177 0.000044863 -0.000011075 -0.000015156 -0.000002992 -0.000001363 0.000019516 -0.000007382 -0.000040242 0.000049883 0.000003494 0.000034179 0.000002360 0.000022631 -0.000061996 -0.000021676 0.000040247 -0.000018352 0.000016859 -0.000053646 -0.000009481 -0.000009436 -0.000010792 -0.000055159 0.000108492 0.000019529 0.000014363 0.000015693 -0.000003556 0.000004585 0.000001905 -0.000012043 -0.000003123 -0.000000421 -0.000000659 -0.000001968 0.000006368 0.000002240 0.000001072 -0.000005490 0.000000845 0.000005505 -0.000003679 0.000010087 -0.000005069 -0.000008126 0.000023419 0.000005075 0.000003179 0.000014480 -0.000007433 -0.000002740 0.000005617 -0.000003772 0.000006797 0.000004247 -0.000018534 -0.000003158 0.000001286 -0.000008437 0.000002661 0.000004874 -0.000003662 0.000001035 0.000008571 -0.000002366 -0.000006774 0.000003529 -0.000003503 0.000002153 -0.000000015 -0.000002394 0.000000520 -0.000002246 0.000003759 0.000001363 -0.000007711 -0.000000646 0.000000675 0.000005245 -0.000003188 0.000000856 0.000004336 0.000000615 -0.000004901 0.000000713 0.000005164 -0.000001069 -0.000000548 -0.000000329 0.000000939 -0.000002382 -0.000001168 0.000000446 -0.000001773 -0.000000465 0.000003803 -0.000000362 0.000001399 0.000001284 -0.000001175 0.000000706 0.000001077 0.000000452 0.000002413 -0.000000230 -0.000002945 0.000001063 0.000000420 0.000000602 -0.000000506 0.000000095 0.000000305 0.000000619 -0.000001338 -0.000000279 0.000002417 -0.000000429 -0.000002229 0.000006981 0.000001553 -0.000012681 0.000000634 0.000000995 -0.000007689 0.000003615 0.000001085 -0.000003408 -0.000000441 -0.000003095 -0.000002086 0.000009007 0.000001315 0.000000283 0.000003985 -0.000002714 0.000000534 0.000003276 0.000002192 0.000000954 -0.000000991 0.000000029 0.000001052 -0.000002149 -0.000003263 0.000002697 -0.000001426 -0.000002497 0.000001368 -0.000000110 -0.000001384 0.000003802 0.000000311 0.000001410 0.000001986 -0.000002200 0.000002741 0.000001598 0.000000346 -0.000000872 0.000001704 -0.000002753 -0.000001305 0.000000141 0.000001894 -0.000000298 -0.000001549 0.000000559 0.000000239 0.000002250 -0.000000211 -0.000002268 0.000001035 0.000000583 -0.000001349 -0.000000098 0.000001779 -0.000000622 -0.000004397 -0.000016677 0.000003105 0.000008960 -0.000005979 0.000004661 -0.000004616 -0.000008844 0.000025889 0.000002414 0.000008456 -0.000004351 -0.000001897 0.000011270 -0.000000239 0.000000098 -0.000002471 0.000001436 -0.000001752 -0.000000861 -0.000003198 0.000004318 0.000002360 -0.000011193 0.000001101 -0.000002828 -0.000002759 0.000002127 -0.000007692 -0.000000795 -0.000000727 0.000006089 -0.000003302 -0.000000289 0.000002592 -0.000003322 0.000001438 0.000005751 -0.000015052 -0.000001652 -0.000004840 -0.000000121 0.000001313 -0.000005858 0.000000449 -0.000000802 -0.000003089 0.000000939 -0.000002663 -0.000000754 -0.000000236 -0.000003745 0.000002521 -0.000002392 -0.000001597 -0.000001598 -0.000004595 0.000001469 -0.000001944 -0.000000748 0.000000260 -0.000006011 0.000001595 0.000001586 -0.000001597 0.000000311 -0.000000783 -0.000000493 0.000002743 -0.000000108 0.000001723 0.000000696 -0.000000286 0.000001706 -0.000000739 -0.000001462 -0.000000863 0.000002127 -0.000004983 -0.000000866 -0.000000841 -0.000001130 0.000000990 -0.000001574 -0.000000576 0.000000292 0.000000668 0.000000204 -0.000000347 -0.000000286 -0.000000797 0.000000848 0.000000871 -0.000003640 -0.000000190 0.000002372 0.000002387 -0.000006521 0.000014232 0.000002160 -0.000000425 -0.000000249 -0.000002361 0.000003240 0.000000566 -0.000001678 -0.000004818 0.000004658 -0.000008236 -0.000002462 -0.000002180 0.000001703 0.000001729 -0.000006366 0.000000069 -0.000002278 -0.000001084 0.000002095 -0.000006454 -0.000000553 0.000000422 -0.000000574 -0.000000801 0.000002898 0.000000090 -0.000001337 0.000002513 -0.000000089 -0.000003308 0.000000657 0.000000584 0.000000628 0.000000129 0.000000875 -0.000000067 -0.000000692 0.000000026 0.000000805 -0.000002724 -0.000000147 -0.000001039 0.000000879 0.000000933 -0.000004111 -0.000000031 0.000000171 0.000001073 0.000000331 -0.000001046 -0.000000007 -0.000027592 0.000011398 -0.000004176 -0.000001443 0.000007065 0.000117747 -0.000009666 0.000005977 0.000021862 -0.000012729 -0.000069749 0.000003080 0.000002867 -0.000001474 -0.000005489 0.000007337 0.000004348 0.000002245 0.000012182 0.000005140 0.000029787 0.000002511 0.000000008 0.000011668 -0.000004770 0.000028217 -0.000000389 0.000000961 0.000004824 -0.000007706 -0.000009048 0.000003216 -0.000001935 -0.000008218 0.000004404 -0.000017227 0.000001900 -0.000002114 0.000000112 0.000005880 -0.000023110 0.000002517 -0.000007563 -0.000014965 0.000004249 0.000001557 0.000002270 0.000002304 0.000006183 -0.000002194 -0.000014128 -0.000003802 -0.000002152 -0.000011838 -0.000004559 -0.000014024 0.000002391 -0.000000691 0.000000247 0.000006142 -0.000215090 -0.000030711 0.000005207 0.000000403 -0.000015007 0.000087542 0.000025654 -0.000005686 -0.000010087 0.000032292 -0.000368480 -0.000022088 0.000008614 -0.000046386 0.000000843 0.000102742 -0.000001275 -0.000001297 -0.000004728 0.000001525 0.000136480 -0.000004740 0.000008364 0.000019924 -0.000010223 -0.000008703 -0.000019541 -0.000000485 -0.000011154 -0.000008623 -0.001309433 0.000041975 0.000022741 -0.000034122 0.000008509 0.000200839 -0.000021962 -0.000000021 -0.000034678 -0.000003135 -0.000505559 -0.000012889 0.000000837 -0.000002857 -0.000002773 0.000013256 0.000004039 -0.000002128 -0.000010868 0.000001655 -0.000058604 0.000021973 0.000006746 0.000000779 0.000000186 -0.000116716 0.000015687 0.000008051 0.000007674 0.000005149 0.229671291 -0.144503417 0.178764929 0.001056069 0.000013841 0.028641396 0.000802069 0.000518038 0.007135653 0.064260834 -0.000088446 0.000682461 -0.001411105 0.049988500 0.353372488 -0.000001022 0.000016859 -0.000005159 0.000001585 0.000010093 0.000022188 0.000022411 0.000003426 0.000019826 0.000002781 0.000019549 0.000002617 -0.000001665 0.000015766 -0.000019287 -0.000001262 -0.000017444 0.000010630 -0.000003265 -0.000010945 -0.000013590 -0.000017464 0.000001702 -0.000014140 0.000001711 -0.000031435 -0.000008266 -0.000004624 -0.000028067 0.000031730 0.000000567 -0.000004265 0.000014529 -0.000007979 0.000000783 0.000002852 -0.000001647 0.000001050 0.000001706 -0.000005210 -0.000002102 -0.000001532 0.000001390 0.000001297 -0.000001330 0.000067752 -0.000482795 -0.000301413 0.000066207 -0.000130233 0.000002213 0.000023474 0.000061223 -0.000012808 0.000036878 -0.000035808 0.000120265 0.000082086 -0.000010665 0.000047970 -0.000113794 0.000465143 0.000181535 -0.000040919 0.000153349 -0.000196100 0.000341466 0.000046961 -0.000104714 -0.000005480 0.000131480 -0.000507868 -0.000438013 0.000117325 -0.000160564 0.000079049 -0.000127835 -0.000050060 0.000025479 -0.000148185 0.000056935 0.000161128 0.000188700 -0.000022143 0.000196729 -0.000027671 0.000219106 0.000246569 -0.000036282 0.000132442 -0.000179978 0.000094521 0.000064994 0.000010836 0.000189768 -0.000049426 -0.000136079 -0.000071123 0.000069273 -0.000203162 0.000050844 -0.000087644 -0.000233983 0.000076088 -0.000206643 0.000035927 -0.000023403 -0.000024504 -0.000007397 -0.000037801 0.000014383 0.000026255 0.000011050 -0.000016070 0.000035450 -0.000014045 0.000013147 0.000044565 -0.000013902 0.000036357 0.000073071 -0.000006432 -0.000054851 0.000002331 -0.000065078 -0.000011327 0.000018855 -0.000017881 -0.000030625 0.000060505 -0.000021645 0.000012649 0.000034867 -0.000017328 0.000037975 0.000039030 -0.000009575 -0.000014696 -0.000017362 -0.000025157 0.000030799 0.000002023 0.000011106 -0.000022272 0.000028329 -0.000014541 0.000012157 0.000023705 -0.000005674 0.000030526 0.000084281 -0.000249114 -0.000091252 -0.000014847 -0.000102254 0.000133491 -0.000464756 -0.000133708 0.000083480 -0.000062365 -0.000167767 0.000323987 0.000160047 -0.000034949 0.000079037 -0.000038325 0.000141475 0.000034503 0.000015567 0.000058729 0.000004759 0.000068164 0.000024879 0.000001902 0.000029310 0.000168345 -0.000327381 -0.000120676 0.000005390 -0.000071171 -0.000006384 0.000004751 0.000006034 -0.000000925 0.000009410 0.000004100 -0.000008768 -0.000005146 0.000002715 -0.000011077 -0.000009215 0.000003393 0.000009717 -0.000000949 0.000010296 -0.000000133 -0.000004149 -0.000001421 0.000002235 -0.000006274 -0.000002899 0.000002226 0.000006144 -0.000000449 0.000004487 0.000002779 -0.000005116 -0.000008714 0.000002208 -0.000010438 0.000001988 0.000007039 0.000006878 -0.000004036 0.000009761 -0.000000966 -0.000001988 -0.000001338 0.000000890 -0.000003150 0.000008674 -0.000000099 0.000001033 -0.000004783 0.000003057 -0.000015514 -0.000005138 0.000014874 -0.000022826 0.000026850 0.000025243 -0.000008389 0.000001228 0.000019488 -0.000045717 -0.000016154 -0.000007234 0.000006434 -0.000005770 0.000014553 -0.000041020 -0.000006345 0.000037016 -0.000004971 0.000037755 0.000019161 -0.000000128 0.000034352 -0.000003563 0.000001798 0.000027437 0.000002595 -0.000007207 0.000018824 -0.000035321 0.000008246 0.000004599 0.000005029 0.000003671 -0.000004553 -0.000006954 0.000003145 0.000001205 -0.000002758 0.000009926 0.000007359 0.000005288 -0.000000408 -0.000001736 0.000006799 -0.000003905 -0.000003606 0.000000935 0.000007183 -0.000005128 0.000003792 -0.000005494 -0.000004163 -0.000000677 -0.000001181 -0.000002993 0.000006605 0.000006896 0.000002258 0.000007086 0.000011748 -0.000007284 0.000010528 -0.000008128 0.000012353 -0.000000036 0.000002190 -0.000002973 -0.000000062 -0.000005399 -0.000000231 -0.000005174 0.000008120 -0.000007729 0.000009514 -0.000007575 0.000003185 -0.000036395 0.000016377 -0.000023905 -0.000015144 0.000009109 -0.000004722 0.000019036 -0.000014334 -0.000003191 0.000007745 0.000012348 -0.000004834 0.000001288 -0.000004892 0.000005960 -0.000012993 -0.000006425 -0.000020526 -0.000010834 -0.000014086 -0.000000508 0.000004788 0.000002050 -0.000028905 0.000083317 0.000003844 -0.000009231 -0.000009803 0.000024334 -0.000019796 0.000003099 0.000016516 0.000037978 -0.000066590 0.000139947 -0.000022596 -0.000002861 -0.000025706 0.000086178 0.000007447 -0.000004765 -0.000025993 -0.000011996 -0.000008205 -0.000059818 0.000001327 0.000009339 0.000006222 0.000007183 -0.000037603 -0.000003419 -0.000001120 -0.000002597 -0.000005807 -0.000031018 0.000009415 -0.000004792 0.000006311 0.000009347 -0.000005033 -0.000012494 0.000002668 -0.000005599 0.000005460 0.000004810 -0.000009981 -0.000005613 -0.000005557 -0.000011806 -0.000007553 0.000033290 -0.000006066 -0.000004799 0.000000380 -0.000004465 -0.000003054 0.000000049 0.000005079 0.000005802 -0.000024081 -0.000012056 0.000000286 0.000013356 0.000002659 -0.000002911 -0.000018434 0.000002079 0.000012301 -0.000000160 -0.000005676 0.000009425 0.000000057 -0.000004694 -0.000005814 -0.000009099 -0.000009620 -0.000001941 0.000010705 0.000006669 -0.000027579 -0.000025740 0.000002971 0.000027945 0.000000592 -0.000005884 0.000027447 -0.000021371 -0.000020502 -0.000002955 -0.000069966 0.000047804 -0.000013339 -0.000015341 -0.000008446 0.000041909 -0.000017601 0.000017033 0.000026616 -0.000007576 -0.000001188 -0.000031566 -0.000003957 0.000033761 0.000008906 0.000006955 -0.000062978 0.000001254 0.000033041 0.000002374 0.000031273 0.000068897 -0.000026172 -0.000052743 -0.000012277 -0.000013440 0.000019537 0.000004518 -0.000005207 -0.000002566 -0.000019630 0.000030814 0.000017901 -0.000029906 -0.000004837 0.000022641 -0.000054197 0.000021549 0.000022624 0.000000470 -0.000006062 0.000004167 -0.000001033 -0.000004173 0.000000165 -0.000003198 -0.000001876 -0.000000338 0.000001880 0.000000926 0.000002691 -0.000004576 -0.000000042 0.000000793 0.000000951 0.000002549 0.000005851 -0.000003142 -0.000008483 -0.000000760 0.000007537 -0.000000877 0.000000850 0.000002121 -0.000000354 -0.000013026 -0.000001902 0.000001038 0.000003004 0.000053681 0.000154278 0.000023522 -0.000095935 -0.000122741 0.000013445 0.000243646 -0.000010779 -0.000055701 -0.000055131 0.000152313 -0.000658227 0.000184577 -0.000216210 -0.000138579 0.000011757 -0.000008710 -0.000030120 0.000011563 0.000005140 -0.000029558 0.000020163 0.000035043 0.000021491 -0.000021841 0.000032065 0.000001999 0.000068557 -0.000024084 -0.000084313 0.000015356 -0.000003780 -0.000005956 -0.000008342 -0.000000614 0.000001101 -0.000003835 -0.000017287 0.000000570 0.000011977 0.000001757 0.000000397 0.000020262 0.000005092 -0.000017023 0.000001677 0.000001138 -0.000008201 0.000008466 -0.000006406 -0.000001828 0.000000384 0.000000638 0.000003800 -0.000001470 0.000000617 -0.000000750 0.000006546 0.000001070 -0.000002432 -0.000002975 -0.000000520 0.000006558 -0.000006746 0.000007083 -0.000001043 -0.000000228 0.000001924 -0.000000799 0.000001077 0.000000117 -0.000000775 0.000004617 -0.000003321 0.000001400 0.000005211 0.000003584 -0.000015139 0.000005378 -0.000003137 -0.000000094 0.000000360 -0.000003772 0.000003093 -0.000002026 -0.000001593 -0.000000398 -0.000002567 0.000004545 -0.000002539 -0.000002979 -0.000001310 0.000002807 -0.000000154 0.000000795 -0.000001002 0.000001164 -0.000001505 -0.000001256 0.000002846 0.000001683 0.000000255 -0.000004762 -0.000001768 0.000000647 0.000002310 0.000001579 -0.000004988 -0.000000631 0.000001201 -0.000000879 0.000001803 -0.000002623 -0.000000493 0.000002980 0.000000566 0.000001317 -0.000003288 -0.000000882 0.000001952 -0.000000421 0.000000091 0.000001731 -0.000002411 0.000002399 0.000003717 -0.000000092 -0.000000044 -0.000003662 0.000000327 0.000000118 0.000000763 -0.000001616 0.000002192 -0.000000887 -0.000001715 -0.000000063 0.000000857 0.000002785 -0.000001393 0.000002450 -0.000000927 0.000004126 -0.000003108 0.000000140 -0.000000105 0.000000170 -0.000000096 0.000002608 -0.000001793 -0.000024786 -0.000003928 0.000040382 -0.000008104 0.000015888 -0.000002360 -0.000005312 0.000009269 -0.000000255 -0.000004764 -0.000003503 -0.000001789 -0.000033360 0.000024523 -0.000024912 -0.000001004 0.000000546 0.000001364 -0.000000695 0.000001605 0.000001351 -0.000002163 0.000000373 0.000000203 -0.000003247 -0.000000705 0.000001282 -0.000001230 0.000000134 0.000001469 -0.000000300 -0.000000609 0.000000494 -0.000000136 -0.000000359 0.000001767 -0.000001447 0.000000225 0.000000512 -0.000003219 -0.000001407 0.000000110 0.000001364 -0.000001681 0.000002361 0.000041225 -0.000355779 0.000031749 -0.000014321 0.000032652 -0.000027147 -0.000117822 -0.000019706 -0.000002001 0.000008103 -0.000134406 0.000401284 -0.000128612 0.000140982 0.000092316 -0.000067685 -0.000007077 -0.000021649 0.000112046 0.000104955 -0.000050471 0.000012304 -0.000052415 0.000061437 0.000054426 -0.000082519 0.000270056 -0.000096241 0.000113547 0.000092867 0.000010721 0.000000904 -0.000009306 -0.000002579 -0.000001976 0.000002750 0.000004629 -0.000003566 -0.000002251 0.000006043 0.000003869 0.000001873 0.000011996 -0.000012484 0.000012558 0.000012440 0.000000644 -0.000023463 0.000007083 -0.000012824 -0.000001959 0.000003767 -0.000012559 0.000004373 0.000001690 -0.000000457 -0.000000788 0.000027759 -0.000017645 0.000016448 -0.000001822 0.000001554 -0.000001012 0.000000415 0.000001469 0.000000788 -0.000001201 0.000001484 -0.000000971 -0.000000424 0.000002424 0.000001547 -0.000001430 0.000000007 -0.000002911 0.000003560 -0.000003092 0.000003118 -0.000001118 -0.000003545 -0.000001342 -0.000002177 0.000004590 -0.000002652 0.000001716 -0.000003677 0.000002258 -0.000001796 0.000001742 0.000003123 0.000002177 0.000000822 -0.000003326 0.000000426 -0.000001748 -0.000002399 -0.000000676 0.000002841 -0.000000300 0.000001899 -0.000001082 0.000000112 0.000000380 -0.000000289 0.000001668 -0.000001544 0.000000490 -0.000000510 -0.000000141 0.000001952 -0.000001242 -0.000001406 0.000003246 -0.000000930 0.000001290 0.000001020 0.000000217 -0.000001390 0.000000338 -0.000000459 -0.000000028 0.000000357 -0.000000702 0.000000383 -0.000000287 0.000000957 -0.000000076 -0.000000193 -0.000000188 -0.000000850 0.000000008 -0.000000308 0.000001217 0.000000010 -0.000000641 -0.000000849 -0.000000132 0.000000998 0.000000195 0.000000314 -0.000000048 -0.000000115 0.000000282 0.000000003 -0.000000053 0.000000804 -0.000000074 -0.000000188 0.000000023 -0.000000983 -0.000002828 0.000000431 0.000000280 -0.000000105 0.000003113 0.000001592 0.000000729 -0.000003063 0.000001046 -0.000001892 0.000001502 -0.000000799 0.000000547 -0.000001132 -0.000000566 -0.000000955 -0.000001039 0.000002441 -0.000000913 0.000001114 -0.000000511 -0.000000466 0.000000316 0.000000005 0.000000567 0.000000635 0.000000937 -0.000002016 0.000000094 -0.000000161 0.000000694 -0.000000354 0.000000425 0.000000021 -0.000000923 -0.000000191 -0.000000567 0.000001212 -0.000000395 0.000000320 -0.000000387 0.000000566 -0.000000635 0.000001133 -0.000000374 -0.000000455 -0.000000081 0.000000601 -0.000000047 0.000000278 -0.000000714 -0.000000114 0.000000902 -0.000000023 0.000000482 0.000000560 0.000000070 -0.000000300 0.000000337 -0.000000878 0.000003760 0.000001567 -0.000004822 0.000002444 -0.000004580 0.000004055 -0.000001942 0.000002291 0.000000970 -0.000006323 0.000002894 -0.000000550 0.000000385 0.000001119 -0.000004547 0.000001200 -0.000000022 -0.000001386 -0.000000229 -0.000000927 -0.000001389 0.000000367 0.000000576 -0.000001994 0.000003050 -0.000000795 0.000000497 -0.000001574 -0.000000808 0.000001891 -0.000001331 -0.000000362 0.000002454 -0.000000939 0.000001874 -0.000002334 0.000001235 -0.000001332 0.000000380 0.000002655 -0.000000974 -0.000000025 -0.000000956 -0.000001682 0.000003006 0.000000057 0.000000362 -0.000000918 -0.000000451 0.000000380 -0.000000187 0.000000717 -0.000001591 0.000000786 0.000000164 0.000000340 -0.000000026 -0.000002058 -0.000001199 0.000001142 0.000001287 0.000000217 -0.000001998 -0.000000035 -0.000000892 0.000000718 -0.000000129 0.000000054 -0.000000020 -0.000000797 0.000000312 0.000000449 0.000000850 0.000001402 -0.000001966 -0.000001199 0.000000455 -0.000001347 0.000000013 0.000001951 0.000000014 0.000000054 -0.000001009 -0.000000293 0.000000569 -0.000000365 0.000000393 0.000000373 0.000000906 -0.000000295 -0.000001372 0.000000535 0.000000292 0.000000551 0.000001166 0.000002023 -0.000001196 0.000002375 -0.000000087 -0.000002754 0.000000654 -0.000000435 0.000000176 -0.000001091 0.000000150 -0.000000785 0.000001026 -0.000002993 0.000000423 0.000001522 -0.000000762 0.000000184 -0.000000466 -0.000001061 0.000001933 -0.000000387 0.000000054 -0.000001589 -0.000001666 0.000002094 0.000000990 -0.000000352 -0.000000092 -0.000000348 -0.000000882 -0.000000676 -0.000000040 0.000000515 -0.000001041 0.000001474 -0.000000193 0.000000191 0.000000366 0.000001022 -0.000000586 -0.000000625 0.000000190 -0.000000245 -0.000000300 0.000001030 -0.000001214 0.000000221 -0.000000245 -0.000000168 0.000001666 -0.000000624 0.000000335 0.000000514 0.000000890 -0.000000038 0.000008025 0.000012079 -0.000000232 -0.000000386 -0.000000408 -0.000000635 0.000019214 0.000006929 0.000000780 0.000002689 0.000000690 0.000007773 -0.000000658 0.000001048 0.000012051 -0.000003931 0.000008442 0.000002018 0.000003536 0.000004234 0.000005187 -0.000007071 -0.000001770 0.000004060 -0.000001227 0.000003039 -0.000001028 -0.000003983 0.000005967 0.000001907 -0.000000475 -0.000003683 -0.000000551 -0.000001037 -0.000004034 -0.000000145 -0.000005264 -0.000000424 0.000001821 0.000000747 0.000005986 -0.000016659 -0.000010265 -0.000000244 -0.000009836 -0.000000595 0.000006817 0.000001514 0.000000435 0.000003250 0.000002786 -0.000012483 -0.000007674 0.000000673 -0.000002865 -0.000002124 -0.000005254 -0.000004058 -0.000000168 -0.000001139 0.000015763 0.000016558 -0.000012407 0.000006131 -0.000017303 -0.000025573 -0.000003649 0.000026318 -0.000022800 0.000027452 0.000006239 -0.000017597 -0.000040767 -0.000004900 -0.000003467 0.000002361 -0.000007507 0.000002018 0.000006458 -0.000009981 0.000000657 0.000014070 0.000010611 0.000012643 -0.000003257 0.000008544 -0.000002095 -0.000015056 0.000013252 -0.000022349 -0.000010955 0.000005536 0.000003369 -0.000018864 0.000024191 0.000007101 -0.000005373 0.000009540 0.000020281 -0.000029294 -0.000001637 0.000002474 -0.000012233 0.000003889 0.000002040 0.000002359 -0.000011978 -0.000002410 -0.000000252 -0.000002440 -0.000002338 0.000011846 0.000018354 -0.000004034 0.000006661 -0.000006812 0.000007798 0.000007539 -0.000008896 0.000013534 0.043651478 0.011122561 0.544848594 0.042568220 0.137682413 0.460307353 -0.018479053 -0.021771504 -0.047682709 0.030196409 -0.011080330 -0.081059346 -0.081974140 0.013853143 0.121292424 -0.043369746 -0.106737267 -0.321268345 0.038062346 0.105774707 -0.000179395 0.000031304 -0.000145857 0.000207549 0.000107736 -0.000022010 0.000137182 0.000101195 0.000015808 -0.000107782 -0.000094549 0.000046260 -0.000058365 0.000110922 0.000029977 0.001131856 -0.005896432 -0.001874317 0.000087007 0.002239991 0.000805633 0.000419960 -0.000097843 -0.000498352 -0.000361319 -0.000178345 0.001458997 0.000559631 -0.000193324 -0.000718241 -0.000059649 0.002779992 0.000835762 -0.000293151 -0.001209615 -0.000440525 0.000653561 0.000146495 0.000169628 -0.000096061 0.000552283 -0.005710276 -0.001889719 0.000603434 0.002594034 -0.000138791 -0.000910852 -0.000226377 0.000226654 0.000478763 -0.000434872 0.004159930 0.001417095 -0.000278242 -0.001826203 -0.000012286 0.003283614 0.001155955 -0.000521602 -0.001599591 0.000294131 0.000135680 -0.000263511 -0.000269589 -0.000092830 -0.000037606 -0.003275102 -0.001102828 0.000469654 0.001653842 -0.000716622 -0.000222698 -0.000199887 0.000621159 0.000491187 -0.000116354 -0.000031974 0.000070302 0.000107341 0.000045830 0.000199093 0.000446251 0.000139357 -0.000214010 -0.000323938 0.000104754 -0.000015037 0.000054553 -0.000082269 -0.000066264 0.000071028 0.000249901 0.000241782 -0.000097241 -0.000217107 0.000100700 0.000522849 0.000181895 -0.000147463 -0.000321116 0.000178247 -0.000054660 0.000033501 -0.000146157 -0.000066288 -0.000005184 -0.000002097 0.000072400 0.000009013 -0.000027545 -0.000018884 0.000503375 0.000186498 -0.000050397 -0.000248394 0.000111060 0.000065448 0.000042688 -0.000102531 -0.000089358 -0.000243452 -0.000967084 -0.000265776 0.000357428 0.000547846 -0.000133590 -0.001625545 -0.000500202 0.000478277 0.000853566 0.000430026 0.000690340 0.000240688 -0.000500139 -0.000556530 0.000072342 0.000456172 0.000121008 -0.000149626 -0.000259518 0.000006588 0.000226055 0.000065321 -0.000047291 -0.000110398 -0.000106896 -0.000733796 -0.000241542 0.000212862 0.000393765 0.000072769 -0.000060558 -0.000036545 -0.000059114 -0.000000329 -0.000159315 -0.000020133 -0.000003285 0.000122109 0.000092476 0.000074760 -0.000101570 -0.000064343 -0.000050317 0.000025157 -0.000076851 -0.000055699 -0.000014355 0.000066113 0.000067935 -0.000021805 -0.000003589 0.000000685 0.000015095 0.000013539 0.000035145 -0.000084284 -0.000033036 -0.000013026 0.000026893 0.000028131 0.000136967 0.000052262 -0.000037347 -0.000084741 -0.000008809 -0.000007818 0.000004687 0.000011687 0.000003796 -0.000008516 0.000076405 0.000028875 -0.000006971 -0.000034200 -0.000155575 -0.000390278 -0.000333200 0.000183030 0.000350868 -0.000099536 -0.000097070 -0.000022809 0.000094456 0.000101510 -0.000073876 0.000123282 0.000038458 0.000065338 -0.000047561 -0.000015066 -0.000016892 -0.000024259 0.000020889 0.000018631 0.000022908 -0.000062323 -0.000012050 -0.000009499 0.000017036 0.000048013 -0.000045218 0.000011864 -0.000039859 -0.000005548 -0.000007464 0.000041226 0.000025341 -0.000001427 -0.000019726 0.000005659 0.000033714 0.000002567 -0.000009394 -0.000015723 0.000032336 0.000077150 0.000004956 -0.000032806 -0.000049180 -0.000003542 -0.000098099 -0.000037169 0.000015568 0.000052337 0.000004750 -0.000011321 -0.000008325 -0.000002775 0.000005349 -0.000002945 0.000101727 0.000032280 -0.000011004 -0.000048608 0.000005179 0.000106287 0.000048745 -0.000017332 -0.000059893 -0.000000616 0.000001004 0.000011308 0.000001407 -0.000004796 -0.000012192 -0.000058985 -0.000031911 0.000017770 0.000039746 -0.000012348 0.000024680 -0.000006732 0.000006804 -0.000001534 -0.000009269 -0.000030212 -0.000013320 0.000011971 0.000020072 0.000019407 -0.000066530 -0.000007003 -0.000007906 0.000018892 -0.000006037 -0.000123083 -0.000032552 0.000023032 0.000060042 0.000007649 -0.000012710 -0.000012700 -0.000004960 0.000005682 0.000012366 0.000098266 0.000033819 -0.000028555 -0.000051325 -0.000024942 -0.000031978 -0.000023726 0.000030186 0.000031857 0.000009524 -0.000039152 -0.000009409 -0.000003091 0.000015393 0.000017224 0.000107324 0.000040383 -0.000035689 -0.000062818 -0.000017259 -0.000016930 -0.000011734 0.000019636 0.000019125 -0.000019320 -0.000025964 -0.000003363 0.000022343 0.000020328 0.000016992 0.000025854 0.000007196 -0.000020156 -0.000022683 0.000034634 -0.000033598 0.000114860 0.000055912 0.000011315 0.000006207 -0.000872768 -0.000324266 0.000032493 0.000597349 0.000052260 0.000152153 0.000112036 -0.000062117 -0.000140854 -0.000046121 0.000138477 0.000146971 0.000036658 -0.000235079 -0.000001779 0.000681034 0.000183925 -0.000064046 -0.000229148 0.000268200 0.000260806 -0.000066438 -0.000184448 0.000091288 -0.000023543 -0.000351474 -0.000151413 0.000134756 0.000019423 -0.000065452 -0.000836959 -0.000264450 0.000182724 0.000186388 0.000052046 0.000150560 0.000125959 -0.000068925 -0.000142452 0.000097059 0.000568881 0.000205709 -0.000156929 -0.000216395 0.000085045 0.000649388 0.000237241 -0.000143591 -0.000306967 -0.000056904 -0.000619618 -0.000204313 0.000111982 0.000209907 0.000010010 -0.000108840 -0.000085324 -0.000002966 0.000109866 -0.000026144 0.000032841 -0.000046659 0.000026782 0.000097256 -0.000045326 0.000062227 0.000068051 0.000085311 -0.000082808 0.000004894 -0.000046410 -0.000066201 -0.000006114 0.000018612 0.000008700 0.000137318 0.000052394 -0.000037228 -0.000102080 -0.000000258 0.000118939 0.000056825 -0.000041397 0.000039872 0.000167509 0.000033473 -0.000014658 -0.000205325 0.000219748 -0.000163037 -0.000457905 -0.000146330 0.000172033 0.000068268 0.000009023 -0.000130482 -0.000052893 0.000101165 -0.000002353 -0.000037041 -0.000296833 -0.000064153 0.000043708 0.000089956 -0.000007874 0.000232800 0.000053468 -0.000003468 -0.000100173 0.000056075 -0.000291534 -0.000131798 -0.000001525 0.000093331 -0.000254004 -0.001195108 -0.000404141 0.000394367 0.000468907 -0.000290125 -0.001847043 -0.000667973 0.000518297 0.000665030 0.000102430 -0.001465258 -0.000279146 -0.000015848 0.000479501 -0.000023538 -0.000003415 0.000009962 0.000024772 0.000002400 0.000003235 -0.000004125 -0.000008918 -0.000002702 0.000005337 -0.000011086 0.000006110 0.000013423 0.000009387 -0.000002297 -0.000003588 0.000059922 0.000054341 -0.000009087 -0.000035634 -0.000004821 -0.000048941 -0.000031174 0.000008852 0.000032902 -0.000004868 0.000169306 0.000110142 -0.000001608 -0.000130509 0.000038861 0.000168676 0.000080467 -0.000049070 -0.000115867 0.000011806 -0.000008442 0.000007289 -0.000013898 -0.000002317 0.000026685 -0.000070077 0.000041328 -0.000030468 0.000001323 -0.000016271 -0.000133094 -0.000083150 0.000028069 0.000086974 -0.000005360 -0.000087028 -0.000028867 0.000011329 0.000050413 0.000006485 -0.000215150 -0.000035144 -0.000003921 0.000111859 0.000169442 0.000226920 0.000197487 -0.000185803 -0.000236207 0.000018073 0.000066885 0.000039211 -0.000023252 -0.000051863 -0.000056779 0.000119867 0.000005543 0.000059266 -0.000036997 -0.000121201 -0.000006997 -0.000139730 0.000115493 0.000115908 0.000018806 -0.000092220 -0.000044432 -0.000025805 0.000074179 -0.000008621 0.000024865 0.000017697 -0.000011053 -0.000003111 0.000107048 -0.000245985 0.000092965 -0.000118040 0.000040156 0.000067182 0.000010216 0.000002138 -0.000072371 -0.000024688 0.000056365 0.000232548 0.000031059 -0.000049967 -0.000151369 -0.000008982 -0.000014575 -0.000015939 0.000012686 0.000013189 0.000007371 0.000015920 0.000037932 -0.000013405 -0.000022090 0.000021518 -0.000010218 0.000017486 -0.000024588 -0.000006572 0.000001772 -0.000017463 -0.000008811 -0.000000898 0.000009925 -0.000009739 -0.000020234 0.000008999 0.000008100 0.000009768 0.000000680 -0.000016290 -0.000002104 -0.000000298 0.000006734 -0.000183033 -0.001186656 -0.000537227 0.000249113 0.000781529 -0.000136739 -0.000233537 -0.000111079 0.000132919 0.000199287 -0.000176133 0.000264113 -0.000144381 0.000128427 0.000037872 0.000054641 -0.000198955 -0.000002471 -0.000050990 0.000066395 -0.000080144 0.000096194 0.000006612 0.000064037 -0.000012390 0.000023449 -0.000001150 -0.000035497 -0.000030141 0.000016226 -0.000073519 0.000043019 -0.000031935 0.000075472 0.000021602 -0.000055281 0.000316419 0.000051496 0.000062867 -0.000175845 -0.000016101 -0.000075865 -0.000103612 0.000012736 0.000126059 0.000116572 0.000246281 0.000094370 -0.000158044 -0.000099697 0.000101161 0.000390525 0.000176698 -0.000165697 -0.000136414 -0.000125224 0.000851186 0.000139595 0.000089732 -0.000280317 0.000173241 0.000972216 0.000262193 -0.000263753 -0.000370675 0.000097586 0.001139468 0.000387458 -0.000237584 -0.000400566 0.000012944 0.001312135 0.000326473 -0.000107089 -0.000452543 0.000085845 0.000455169 0.000234266 -0.000104944 -0.000319763 0.000124161 0.000125140 0.000082216 -0.000113687 -0.000136748 0.000135607 -0.000003439 0.000157332 -0.000116767 -0.000125613 0.000033920 0.000590889 0.000202824 -0.000073421 -0.000338150 0.000058585 0.000165171 0.000035867 -0.000061490 -0.000106776 0.000051305 -0.000356044 -0.000005312 -0.000015104 0.000121913 0.000024885 -0.000092254 -0.000094794 -0.000012199 0.000083040 -0.000003894 0.000074114 0.000037904 0.000006709 -0.000031139 -0.000018135 0.000018414 0.000074255 -0.000001518 -0.000050765 -0.000003758 0.000270652 0.000207445 -0.000020253 -0.000211847 -0.000010859 0.000081889 -0.000010887 -0.000000503 -0.000038583 0.000022404 -0.000165383 -0.000124861 0.000005169 0.000149484 0.000029449 0.000084732 0.000082061 -0.000058117 -0.000049914 -0.000020335 -0.000093445 -0.000066336 0.000039511 0.000044814 -0.000040698 -0.000062352 -0.000024503 0.000049128 0.000022451 -0.000000718 -0.000047270 -0.000062846 0.000010989 0.000048134 -0.000024744 0.000016514 -0.000016044 0.000041140 -0.000010054 -0.000009919 0.000029306 0.000076445 -0.000016155 -0.000048169 0.000020997 -0.000035009 -0.000032788 -0.000007704 0.000033787 0.000000341 0.000046753 0.000032470 -0.000010598 -0.000030442 0.000012019 0.000005761 -0.000013098 -0.000004159 0.000003761 0.000002152 -0.000033439 -0.000036706 0.000010323 0.000027767 0.000002129 -0.000003907 -0.000007219 0.000001994 0.000002005 0.000010809 0.000032988 0.000011176 -0.000013180 -0.000013532 -0.000006180 -0.000122617 -0.000086747 0.000014980 0.000082950 0.000045338 0.000044230 0.000038189 -0.000062147 -0.000015494 -0.000030263 0.000026376 0.000066067 0.000026567 -0.000049731 -0.000018141 0.000006130 -0.000016481 0.000034121 -0.000007251 0.000016872 0.000011796 -0.000003581 -0.000010082 -0.000002939 -0.000006496 -0.000053730 0.000018679 -0.000010407 0.000016256 0.000002185 0.000049373 0.000020652 -0.000006323 -0.000030756 -0.000005076 0.000055564 0.000007799 0.000005493 -0.000030861 0.000017276 0.000002165 -0.000025224 -0.000012617 0.000019583 -0.000001071 -0.000001175 -0.000022905 0.000006966 0.000011941 -0.000004781 -0.000015437 -0.000024577 0.000011087 0.000015901 0.000010364 0.000021455 0.000006581 -0.000011204 -0.000008551 0.000074474 0.000070935 0.000066267 -0.000089982 -0.000027250 0.000016137 0.000251646 0.000153862 -0.000040213 -0.000198816 0.000016729 0.000143415 0.000073550 -0.000030520 -0.000109084 0.000015942 -0.000002597 0.000000764 -0.000013478 0.000011937 -0.000015503 -0.000111094 -0.000073878 0.000031432 0.000094701 0.000009887 -0.000059536 -0.000033267 -0.000001134 0.000045348 -0.000032424 -0.000023765 -0.000021822 0.000037043 0.000011781 0.000005258 -0.000145179 -0.000087196 0.000010977 0.000114620 -0.000018342 -0.000065353 -0.000027512 0.000024615 0.000042005 0.000013772 -0.000008279 -0.000005016 -0.000013165 0.000005542 0.000017602 -0.000014153 -0.000003834 -0.000014572 0.000011540 0.000006909 -0.000003405 0.000007173 -0.000007518 -0.000000318 0.000019614 0.000023100 0.000021589 -0.000023568 -0.000012607 0.000000786 0.000022083 0.000018209 -0.000004799 -0.000016112 0.000015884 0.000014718 0.000001860 -0.000017145 -0.000002216 -0.000000683 -0.000044183 -0.000021110 0.000005144 0.000027574 0.000001385 -0.000011336 -0.000005042 -0.000000332 0.000008622 0.000002663 -0.000011475 -0.000010333 -0.000000680 0.000009802 -0.000001641 -0.000043740 -0.000023933 0.000004852 0.000027585 -0.000017620 0.000117275 0.000056890 0.000005198 -0.000084843 -0.000005600 0.000027714 0.000021823 0.000001074 -0.000024088 0.000019588 -0.000064708 -0.000031863 -0.000011187 0.000049656 -0.000010599 -0.000062114 -0.000043487 0.000018719 0.000054922 0.000000211 -0.000045430 -0.000022564 0.000005040 0.000035178 0.000000853 0.000027808 0.000015512 -0.000003836 -0.000017395 -0.000009381 -0.000026888 -0.000017434 0.000012573 0.000019945 -0.000000855 0.000001226 -0.000005800 0.000001443 0.000002756 -0.000000136 -0.000021092 -0.000009726 0.000002060 0.000013045 -0.000004777 -0.000036020 -0.000017975 0.000008521 0.000020708 -0.000000505 -0.000017016 -0.000013257 0.000002889 0.000012429 0.000036223 0.000343461 0.000296020 -0.000120475 -0.000344384 -0.000150957 0.000447535 0.000024883 0.000216473 -0.000007952 0.000373978 -0.000663775 -0.000360070 -0.000160257 0.000154554 -0.000117538 0.000339629 0.000042925 0.000072165 -0.000023700 -0.000130521 0.000212401 0.000073551 0.000089578 -0.000032115 0.000040771 -0.000135253 0.000031895 0.000002157 -0.000027527 0.000201978 -0.000439671 -0.000033234 -0.000031415 0.000070903 0.000087951 -0.000028627 -0.000006774 -0.000058967 -0.000034466 -0.000015020 0.000136678 0.000047543 -0.000027341 -0.000048202 0.000176588 0.000373640 0.000006212 0.000020611 -0.000033368 0.000400486 -0.000875309 -0.000120303 -0.000167957 0.000045768 -0.000059577 0.000220832 -0.000052115 -0.000061738 -0.000063237 0.000169407 -0.001038088 0.000612563 -0.000526408 -0.000302398 0.000173017 0.000250663 -0.000105360 0.000320394 -0.000189746 0.000916355 0.000017806 0.000132948 0.000291874 0.000056600 -0.000179143 -0.000021650 0.000438699 0.000397151 0.000125915 -0.000142882 0.000242933 0.000029592 0.000064505 -0.000045815 0.000062177 -0.000037487 -0.000160782 -0.000138075 -0.000040648 -0.000736279 -0.000019898 -0.000087225 0.000141540 0.000408582 -0.000067100 0.000168058 0.000052290 0.000067878 -0.000015004 0.000458137 0.000041693 0.000110230 -0.000028603 -0.000324737 -0.000398339 -0.000866724 -0.000346907 -0.002573319 -0.000560237 -0.000277914 -0.001815232 -0.000164727 -0.000839085 0.000793763 -0.001218379 0.001181478 -0.001033871 0.001068998 0.000688319 0.309005173 0.000329876 0.675913399 -0.000185430 0.033633403 0.259514077 0.000133264 -0.009496488 0.176619899 0.619970914 0.001681411 -0.000433378 0.000031735 -0.000077292 0.257869386 -0.000187443 0.000068419 -0.000020882 -0.000015577 0.147087313 -0.000675540 0.000146083 0.000000134 0.000019129 -0.177335576 -0.000954568 0.000212356 -0.000060629 -0.000025473 -0.112739551 0.000174637 -0.000219711 -0.000002273 0.000021358 -0.020671490 0.002195607 -0.000554627 0.000089641 0.000033561 0.076652031 0.000370571 -0.000180468 0.000050093 -0.000014417 0.003701515 -0.001768480 0.000662944 -0.000061707 -0.000031699 0.037717652 -0.001597743 0.000362863 -0.000049635 -0.000076712 0.041273481 0.000295532 -0.000031299 -0.000139726 0.000172120 0.004793154 0.001651353 -0.000860515 0.000057088 -0.000009691 -0.022033804 0.000679025 -0.000001372 -0.000028336 0.000236780 -0.006354976 -0.000046964 0.000039807 0.000011923 -0.000026592 -0.001347374 -0.000324127 0.000203368 -0.000032924 0.000020895 0.003082944 -0.000130335 -0.000002325 0.000014819 -0.000050586 0.000245307 -0.000439084 0.000116799 0.000040080 -0.000258319 0.000132592 -0.000330525 0.000343869 0.000035547 -0.000110135 0.002342084 -0.000145153 -0.000031429 -0.000095732 -0.000276872 0.000337212 -0.000125188 0.000059382 0.000026593 -0.000053449 -0.000831923 -0.000273489 0.000135864 0.000001105 -0.000019103 0.002581920 -0.000115857 -0.000027047 0.000006454 -0.000051841 0.001195214 0.000431490 -0.000034236 0.000037774 0.000024161 -0.024852660 0.000605830 0.000025967 0.000046273 0.000019630 -0.050463700 -0.000538638 0.000039686 -0.000036899 -0.000041576 0.030360753 -0.000189616 0.000023966 -0.000018313 -0.000003169 0.007628576 -0.000069055 -0.000018419 -0.000006482 -0.000003907 0.003459399 0.000365098 -0.000003078 0.000020431 0.000018330 -0.010045040 0.000015531 0.000001721 -0.000019661 0.000026450 0.000110643 0.000088905 -0.000081156 0.000032778 -0.000002186 -0.000197361 0.000046477 -0.000048904 0.000006962 0.000002409 -0.000208256 0.000066637 -0.000084292 0.000028518 -0.000027831 -0.000346702 0.000012805 -0.000048180 0.000016723 -0.000022673 0.000114646 0.000026541 0.000002893 -0.000013746 -0.000005079 -0.000676444 -0.000091801 0.000036060 -0.000000327 -0.000012103 0.000688752 -0.000000365 0.000026430 -0.000008282 0.000016985 -0.000309190 -0.000043143 0.000015100 0.000002331 -0.000010502 0.000493641 0.000646953 0.000117918 -0.000036556 0.000055911 -0.000800825 0.000089305 -0.000236378 0.000009842 0.000127585 -0.000106074 -0.000040673 0.000046385 0.000050986 0.000090685 0.000021691 0.000047920 0.000032138 0.000020469 0.000010209 -0.000219405 0.000006433 -0.000026273 0.000041401 0.000091312 -0.000029413 -0.000045110 -0.000051071 -0.000011487 -0.000025029 0.000136445 -0.000038522 -0.000150095 0.000020542 0.000166608 0.000573884 -0.000006013 0.000034663 -0.000014970 -0.000014821 0.000336107 -0.000020055 0.000089790 0.000037910 0.000133323 0.000426034 0.000057769 -0.000032076 0.000002302 0.000004021 -0.000483772 0.000010247 -0.000008988 -0.000000283 -0.000000566 -0.000008719 -0.000046266 0.000031282 -0.000004236 0.000009411 0.000585785 -0.000078786 0.000031291 0.000003593 -0.000012446 0.000549848 -0.000018683 0.000009578 0.000002589 -0.000006839 -0.000139164 0.000055439 -0.000013609 -0.000004197 0.000014397 -0.000335887 0.000018833 0.000002423 -0.000004009 0.000009949 0.000081332 0.000024947 -0.000002655 -0.000000635 0.000009295 -0.000213384 -0.000000322 -0.000018774 0.000005330 -0.000010574 -0.000255549 0.000046923 -0.000017000 0.000004270 0.000000520 -0.001534707 0.000013681 -0.000007838 -0.000000662 0.000000643 -0.000046529 -0.000048113 -0.000006083 -0.000002020 -0.000001689 0.001585827 0.000046512 0.000008973 -0.000000064 0.000003167 -0.001903833 0.000010046 -0.000014537 0.000000736 -0.000000571 -0.000567580 -0.000060675 0.000003836 -0.000002796 -0.000002617 0.001894733 0.000020643 -0.000001162 0.000001116 0.000001971 -0.000679117 0.000010159 0.000007345 0.000001953 0.000001312 -0.000790687 -0.000018030 0.000006486 -0.000001476 -0.000000904 0.000837176 -0.000117731 0.000130329 0.000063403 0.000029197 0.000319622 0.000598241 0.000188476 0.000014790 0.000050757 0.000674599 -0.000155467 -0.000116380 -0.000017957 -0.000018450 0.000061349 -0.000248930 -0.000063158 -0.000011373 -0.000021684 -0.000343671 -0.000327309 -0.000108047 -0.000031547 -0.000021310 -0.000024004 0.000273748 0.000024559 -0.000003687 0.000005042 -0.000326770 0.000236636 0.000021236 -0.000002018 0.000006243 0.000017656 0.000452542 0.000027686 0.000005593 0.000008116 0.000001998 -0.000233003 -0.000052280 -0.000006822 -0.000014205 -0.000378379 -0.000365793 -0.000082030 -0.000011929 -0.000022228 -0.000533613 -0.000392937 -0.000145349 -0.000027602 -0.000034666 0.000057300 0.000330073 0.000046134 0.000009135 0.000014180 0.000408388 0.000188274 0.000020795 -0.000001601 0.000006626 -0.000039853 0.000092247 0.000060268 0.000010643 0.000011569 0.000045847 -0.000078012 0.000003056 0.000003548 0.000000719 0.000090189 0.000082583 -0.000059707 -0.000021218 -0.000009284 0.000066998 -0.000126267 -0.000061058 -0.000016362 -0.000014095 0.000027004 -0.000103601 0.000073070 0.000009051 0.000018653 -0.000027343 0.000129374 0.000025351 0.000009877 0.000007824 0.000257734 0.000141538 0.000025033 0.000005140 0.000005955 0.000049056 0.000094755 0.000020370 0.000006233 0.000004642 0.000034750 0.000124133 0.000013882 0.000003224 0.000004039 0.000386422 -0.000133794 -0.000013881 -0.000003792 -0.000003931 -0.000269085 0.000163743 0.000009697 0.000002182 0.000003352 0.000206554 0.000771138 0.000210027 0.000032892 0.000052723 0.000095868 0.001250338 0.000272319 0.000032868 0.000073964 -0.000455387 0.000654654 -0.000043258 0.000001218 0.000004796 0.002417577 -0.000012887 0.000015065 0.000002984 0.000001921 0.000020789 0.000018841 -0.000007006 -0.000003903 0.000000540 -0.000017114 -0.000020221 0.000007199 0.000002817 0.000000993 0.000007347 -0.000097672 0.000021187 0.000010503 -0.000000377 -0.000006958 0.000055103 0.000019118 0.000000410 0.000005922 -0.000013429 -0.000196657 -0.000037156 -0.000000420 -0.000010980 -0.000046124 -0.000138031 -0.194047452 0.009650919 0.061730686 0.000317390 -0.000017895 0.028972651 -0.089181800 -0.062006060 0.000015804 -0.000094199 0.128490470 -0.054080929 -0.250750990 -0.000148957 0.000141898 -0.035976913 0.021339507 0.070592975 -0.000206666 0.000045914 0.001357817 0.015652113 0.021666179 -0.000098566 0.000039554 0.021105559 0.015114994 0.042614917 -0.000279404 -0.000366578 0.002258373 0.001736844 0.007403575 0.000609548 -0.000064375 0.003924789 -0.015330057 -0.020300560 0.000069422 0.000028402 0.006519993 -0.021011240 -0.068216092 0.000048784 0.000277178 -0.015117078 -0.031189944 -0.080400767 -0.000193909 0.000055132 -0.014135975 0.005477235 -0.002731523 0.000054608 -0.000046844 -0.030925287 0.005910306 0.031960829 0.000149080 -0.000241542 -0.160562951 -0.021908989 -0.033300376 0.000115186 -0.000026359 -0.042086121 -0.102958647 -0.076063252 0.000145521 -0.000013426 -0.097272167 -0.085931271 -0.271891544 0.000221911 0.000031168 0.009687138 0.006093366 0.015705176 -0.000023346 -0.000068995 -0.002803582 0.002346703 -0.004513400 0.000003319 -0.000038976 -0.012234802 -0.008033951 -0.015098316 0.000050719 0.000012726 -0.004294600 -0.002114738 -0.000858416 -0.000030931 -0.000012133 -0.001870439 0.006478036 -0.002155980 -0.000135821 0.000002627 -0.001166984 -0.002210461 0.001771004 -0.000042534 0.000891794 -0.004259825 0.001225749 -0.000970623 -0.002050333 0.000225111 -0.000313791 -0.001571760 -0.000564021 -0.000859157 0.000280479 0.000174027 -0.001224215 -0.004307668 0.000464593 -0.000033654 -0.004752549 -0.001169967 0.000731189 -0.000113742 0.000023477 -0.001463556 0.006702900 -0.002122484 -0.000075574 0.000035694 0.001163455 -0.002000666 0.002032870 0.000122458 0.000069562 0.011140974 -0.003021228 -0.012105433 -0.000012968 -0.000006943 0.006450752 0.001286983 -0.009113170 0.000059672 0.000177463 0.016520372 -0.005171270 -0.013307364 -0.000071466 -0.000167193 -0.000087617 -0.000014540 -0.000018048 0.000346260 -0.000311796 -0.000082340 -0.000006579 -0.000022058 0.000345758 -0.000370384 0.000061159 0.000005337 0.000004119 -0.001467686 -0.000568059 -0.000124574 -0.000020116 -0.000033579 -0.000489351 -0.000742832 -0.000127555 -0.000014547 -0.000038599 -0.000002356 -0.000697743 -0.000047455 -0.000010304 -0.000020688 -0.001244591 -0.000387090 0.000960524 -0.000898565 -0.001197797 0.000697014 -0.000176868 0.000563654 -0.000037685 -0.000339582 0.000641797 -0.000289167 0.001496794 0.000054488 0.000419947 0.000037426 -0.000322530 0.000954519 0.000276537 0.001919535 0.000925016 -0.000076713 -0.000206856 0.000263917 0.000169568 0.000697010 -0.000008559 -0.001561858 0.000171394 -0.000143176 -0.000674195 0.000196251 0.000018110 0.000002166 -0.000001693 0.000027854 -0.000052293 -0.000059546 -0.000040989 -0.000056537 -0.000029547 -0.000150158 0.000034652 -0.000063942 -0.000009695 0.000044455 -0.000347038 -0.000079143 0.000033580 -0.000043971 -0.000015738 0.000032800 -0.000250711 -0.000318994 -0.000123594 -0.000128531 0.000210180 0.000068560 0.000111538 0.000120239 0.000015987 -0.000128351 0.000058436 0.000018318 0.000018662 0.000072864 0.000102733 -0.000012941 -0.000017990 0.000001862 -0.000075644 0.000034097 -0.000033796 -0.000006968 -0.000019795 -0.000051584 0.000113645 -0.000001788 -0.000003042 0.000009095 -0.000020441 0.000025752 -0.000058733 -0.000017976 -0.000029246 -0.000086604 -0.000129539 0.000010884 0.000006664 0.000008325 0.000011106 0.000056512 0.000022748 0.000009130 0.000005245 0.000040790 -0.000050797 -0.000022387 -0.000004928 -0.000006439 0.000010988 0.000019576 0.000002373 -0.000006216 -0.000003647 0.000006607 0.000054900 0.000031038 0.000004667 0.000008476 -0.000009659 0.000010664 -0.000010342 -0.000000725 -0.000001880 0.000001009 -0.000016468 -0.000007219 -0.000003698 -0.000002104 0.000025205 0.000149223 0.000014592 0.000026277 0.000025676 -0.000049003 -0.000053973 0.000129932 0.000008979 0.000055588 0.000096023 -0.000124633 -0.000101211 0.000003835 -0.000039714 -0.000029036 0.000026421 -0.000066857 -0.000008266 -0.000028010 -0.000067221 0.000003790 -0.000030593 0.000029274 0.000013193 -0.000006402 -0.000034040 0.000019543 0.000001868 0.000008547 0.000026305 -0.000031417 -0.000031770 -0.000017682 0.000002957 0.000005584 -0.000009034 -0.000056541 -0.000006092 -0.000014465 -0.000030048 0.000048260 0.000132701 0.000004921 0.000014549 0.000036415 0.000038242 0.000008028 0.000003979 0.000003040 -0.000010080 0.000037620 0.000018376 0.000002351 0.000004649 -0.000019967 -0.000010125 0.000009328 -0.000005130 -0.000003075 0.000026180 -0.000102164 -0.000844384 -0.000606729 -0.000075137 0.000202594 -0.000271435 0.000078869 -0.001078766 -0.000134688 0.000069573 -0.000116376 -0.000461493 -0.000520625 -0.000882829 0.000070115 -0.000001080 0.003503392 -0.000350459 -0.002189140 0.000041255 0.000128219 0.000097198 -0.003310810 -0.004683765 -0.000069228 0.000052927 0.000533304 -0.003980253 0.006721009 0.000020081 0.000035066 0.000462459 0.000324489 0.000280468 -0.000092203 0.000149044 0.000628288 0.000338735 0.000412520 -0.000002726 0.000045357 0.000466812 0.000432326 -0.000296301 -0.000049773 0.000007037 0.000221485 0.000136747 0.000100553 0.000035259 0.000006949 -0.000175293 -0.000420683 -0.000186731 0.000043494 -0.000013199 -0.000031885 -0.000146322 0.000079141 0.000020811 -0.000034884 0.000122720 -0.000039696 -0.000016760 0.000057394 -0.000030361 -0.000034070 0.000009051 -0.000019728 0.000008938 -0.000000973 0.000046936 -0.000028665 0.000026014 0.000037158 0.000035000 0.000067748 -0.000000370 -0.000005586 -0.000004172 0.000009179 0.000013729 0.000014668 -0.000004406 0.000005393 0.000017318 0.000020703 -0.000011573 0.000036772 0.000005634 0.000038032 -0.000023868 -0.000737391 -0.000430092 -0.000009379 -0.000093757 -0.000832502 0.000766077 0.000022994 -0.000032031 -0.000037280 -0.000174461 -0.000116054 0.000214455 -0.000011360 0.000053337 0.000327739 -0.000441339 0.000063197 0.000048457 0.000076408 -0.000196060 -0.000210041 0.000033508 -0.000036341 0.000039815 0.000021288 -0.000014624 -0.000626289 -0.000006604 -0.000024807 -0.000068665 0.000023080 -0.000031592 0.000006221 0.000030241 0.000067986 -0.000009790 -0.000023656 -0.000032669 0.000010195 -0.000010310 -0.000058762 0.000143728 -0.000000367 0.000015863 0.000082986 -0.000123940 -0.000028202 -0.000004189 0.000028905 0.000072797 -0.000007226 0.000024786 -0.000016925 0.000021480 0.000041251 -0.000007946 -0.000042936 -0.000003257 -0.000414759 0.000034674 -0.000001337 0.000006594 -0.063801992 0.000097371 0.000022808 0.000016643 0.000032171 -0.019929158 0.000438525 -0.000013218 -0.000015045 -0.000014870 -0.003431947 -0.000041543 0.000007890 0.000001242 0.000003048 -0.003633242 -0.000055316 0.000015067 0.000006673 0.000010241 -0.002905277 -0.000027645 0.000000288 0.000002981 0.000003163 -0.005144072 0.000082672 -0.000012157 -0.000001862 -0.000011787 -0.000132797 -0.000061545 -0.000007909 -0.000003889 -0.000009300 -0.015913597 -0.000128695 -0.000005307 0.000000739 -0.000007005 -0.016817074 -0.000051924 0.000009677 0.000001244 0.000007418 0.006102435 0.000032740 -0.000019145 -0.000004006 -0.000011535 0.015112763 -0.000105908 0.000002960 -0.000000660 -0.000000543 0.016884046 -0.000583537 0.000002643 0.000022391 0.000029837 -0.075716743 0.000092620 0.000027609 0.000030838 0.000044961 -0.049625040 -0.000315597 -0.000048794 -0.000034341 -0.000023764 0.016924668 -0.000317644 -0.000062260 -0.000019402 -0.000067886 0.008240251 -0.000053968 -0.000014622 -0.000001983 -0.000014893 0.016830329 0.000016901 -0.000051343 0.000001311 -0.000022151 -0.002536332 0.000713171 0.000056963 -0.000036646 -0.000004497 -0.003488626 -0.000119056 -0.000054712 -0.000040544 -0.000008318 -0.002373806 -0.000463707 0.000057734 0.000048189 0.000069018 0.001014233 0.000372346 0.000048377 0.000007807 0.000041184 -0.007097865 0.000483105 -0.000001082 -0.000025866 -0.000047547 -0.024012824 0.001505951 0.000029907 -0.000015536 0.000001775 0.005013739 0.519363445 0.009879232 0.622654640 -0.043049332 0.137655936 0.367516803 -0.101064396 0.026627866 0.094528397 0.682704704 0.043858394 -0.278608433 -0.233526396 0.083372349 0.684870583 0.018820204 0.025391819 -0.074163369 0.030737970 0.046546433 -0.012498084 -0.021697131 0.020708944 -0.231726990 -0.137024385 -0.041390805 -0.033383923 0.046584603 -0.165721543 -0.249616423 -0.002244984 -0.002206450 -0.008301677 0.016532745 0.016051299 0.010546454 0.009066999 0.018501763 -0.046793305 -0.050250330 -0.000583017 0.000336910 0.007350517 -0.020637828 -0.016233234 0.000251872 0.000327687 0.001047958 -0.004351753 -0.004671718 -0.000465795 -0.001064953 -0.002161069 0.007289739 0.009712114 0.000205238 0.000217564 0.000452117 0.001644630 0.001033623 0.000171557 -0.000020477 0.001013111 -0.000872997 -0.001698081 -0.000893538 -0.000878555 -0.004006994 0.002961481 0.007864118 0.000057907 -0.000169855 -0.000081454 0.000833309 0.000540296 0.000791733 0.000749638 -0.000519175 -0.002805454 -0.002687752 -0.001810447 -0.001660016 0.000571879 0.004587410 0.005989379 -0.000457882 -0.000404659 0.000006886 0.002532374 0.002536154 -0.029296917 0.016442027 -0.104850762 -0.093774016 0.034294948 -0.009656160 0.016540931 -0.073495405 -0.285465609 0.011803691 0.036550438 -0.006161307 0.050433715 0.051407235 -0.115253063 -0.002253929 0.000793598 -0.018612525 -0.022452156 0.014225840 -0.004197838 -0.002840674 -0.027736916 -0.023499880 0.039669673 -0.001877585 0.003505825 0.015999707 0.035152981 -0.012751232 -0.000102531 0.000118711 0.000194962 0.000159131 -0.000068299 -0.000270265 0.000021277 -0.000475889 -0.000280887 0.000722540 0.000425490 -0.000206533 0.000135014 0.000268437 -0.000395096 -0.000058032 0.000142500 0.000175084 -0.001001893 -0.000995768 -0.000092350 0.000006451 -0.000262540 0.000434238 0.000470588 0.000344722 0.000230521 0.000632528 -0.002340239 -0.003420321 -0.000184464 -0.000006352 -0.000867834 0.000702554 0.000487501 0.000087164 0.000034974 0.000391172 -0.000338394 -0.000678662 -0.000178480 -0.000093339 -0.000858272 0.000640289 0.001397866 0.000149713 0.000346740 0.000484367 -0.000713923 -0.001346228 -0.000051227 0.000209372 -0.000132516 -0.000519800 -0.000311642 -0.000075158 0.000190499 -0.000127950 -0.000003098 0.000200999 0.000067829 0.000169705 0.000216789 -0.000116383 -0.000391347 0.000090698 -0.000006099 0.000257380 -0.000070543 -0.000306934 0.000040210 -0.000127549 0.000013795 -0.000035936 0.000069854 -0.000215174 -0.000169629 -0.001042647 0.000676044 0.001995341 -0.000153021 -0.000124118 -0.000723749 0.000613033 0.001313806 -0.000119173 -0.000216389 -0.000518880 0.000573291 0.001384011 0.000439761 0.000351475 -0.000351454 -0.001535959 -0.001182153 0.000115579 0.000088216 -0.000385028 -0.000549248 -0.000125671 -0.000421583 -0.000377303 0.000138234 0.001390494 0.001616993 -0.000068309 -0.000145610 -0.000754169 -0.000571035 0.000923335 0.000029089 0.000069593 0.000081859 0.000147033 -0.000248322 0.000154169 0.000109258 0.000169816 -0.000523803 -0.000710026 -0.000179612 -0.000128141 0.000114357 0.000554130 0.000396344 0.000007743 0.000067725 0.000158598 0.000268274 -0.000368955 0.000185215 0.000181124 0.000198955 -0.000167878 -0.000611133 -0.000401179 0.000329124 0.001257825 0.007505845 0.000595410 -0.000094314 0.000579640 -0.001382501 0.001681943 0.000141849 0.000381007 -0.001007754 -0.001638747 -0.006841379 0.002281271 0.000408577 0.000245389 0.002713291 0.002087571 -0.000944062 0.000020123 -0.000153858 0.000807912 0.002134372 0.002401265 0.000093257 -0.000208221 -0.003538598 -0.008756907 -0.000273233 -0.000699883 0.000063418 -0.000561771 0.001227633 0.002398018 -0.000129576 0.000206471 0.001227221 0.001909217 -0.001193010 0.001167850 0.000183145 0.001990974 -0.001932367 -0.005169082 -0.000064702 -0.000097614 -0.000168748 -0.000033371 0.000342829 -0.000089154 -0.000212472 -0.000357089 -0.000008327 0.000709082 -0.000025705 -0.000001845 -0.000022503 -0.000051213 0.000041651 0.000057937 0.000122143 0.000230640 0.000020753 -0.000378952 -0.000024904 0.000031439 0.000055246 -0.000092596 -0.000119648 0.000065275 0.000089865 0.000159134 0.000044936 -0.000319042 0.000007905 -0.000067042 -0.000031265 -0.000000362 0.000076547 0.000016649 0.000013032 -0.000000247 0.000013245 0.000061619 0.000064244 0.000097743 0.000131312 -0.000005052 -0.000385605 0.000107438 0.000133538 0.000135733 0.000056895 -0.000520989 -0.000015862 0.000025594 0.000017246 -0.000176577 0.000014646 -0.000075884 -0.000127135 -0.000227169 -0.000018658 0.000423928 0.000015283 -0.000011614 0.000000103 0.000077345 -0.000013332 -0.000010126 -0.000023651 0.000033676 0.000005695 0.000035290 -0.000040576 -0.000037164 -0.000023241 0.000038836 0.000120859 -0.000013895 -0.000002705 0.000006385 -0.000026529 0.000047396 -0.000000651 0.000000320 -0.000014590 -0.000047483 0.000032776 0.000011649 -0.000013129 0.000009584 0.000072025 -0.000006955 -0.000044229 -0.000077337 -0.000153873 -0.000043802 0.000295017 -0.000001299 -0.000015924 -0.000025602 0.000005185 0.000060212 -0.000003217 -0.000014638 -0.000020976 0.000004087 0.000040598 -0.000074081 -0.000118736 -0.000210199 -0.000051536 0.000410277 0.000043450 0.000073257 0.000142787 0.000061316 -0.000280883 -0.000029518 -0.000064639 -0.000103396 -0.000055372 0.000215670 -0.000058568 -0.000190663 -0.000285133 0.000431999 0.000489719 0.000029153 -0.000017430 0.000047129 0.000889024 -0.000085528 -0.000628420 -0.000865315 -0.001550869 -0.000315497 0.003085956 0.000018396 -0.000007270 -0.000024888 -0.000011732 0.000031254 -0.000004680 0.000002517 0.000010142 0.000050428 0.000001209 0.000003971 -0.000001664 -0.000014709 -0.000020236 -0.000005308 0.000005613 0.000002545 -0.000013450 -0.000028207 -0.000016253 0.000007872 0.000002025 0.000009289 0.000010459 -0.000018727 0.000001369 0.000018534 0.000015255 -0.000019778 -0.000046060 -0.000077139 -0.000095283 -0.000222258 0.000161637 0.000490025 -0.000001602 0.000001698 -0.000003546 0.000023483 0.000022495 0.000049879 0.000064606 0.000147040 -0.000169035 -0.000345064 0.000060316 0.000065500 0.000168584 -0.000117590 -0.000368907 0.000025865 0.000037763 0.000067186 -0.000048201 -0.000142234 0.000072582 0.000102280 0.000204803 -0.000200734 -0.000463120 -0.000110323 -0.000165222 -0.000329928 0.000279458 0.000777872 -0.000015245 -0.000031131 -0.000045957 0.000016946 0.000103308 -0.000047382 -0.000008231 -0.000129833 0.000077258 0.000244211 0.000017463 0.000006188 0.000036220 -0.000032497 -0.000110187 -0.000001555 -0.000037104 0.000005983 0.000072544 0.000047330 -0.000044306 -0.000104540 -0.000161424 0.000172092 0.000359591 -0.000011836 0.000005959 -0.000057930 0.000061368 0.000128689 -0.000001937 -0.000042137 -0.000021490 0.000077528 0.000106112 -0.000030008 -0.000058097 -0.000079527 0.000065580 0.000201497 0.000006964 0.000007899 0.000020510 -0.000000744 -0.000042104 0.000003130 0.000003973 0.000003723 -0.000034869 -0.000031187 -0.000007621 -0.000014836 -0.000024271 0.000025310 0.000063284 0.000006155 0.000006192 0.000022281 -0.000007978 -0.000037881 0.000038480 0.000051441 0.000109921 -0.000164612 -0.000293154 0.000011632 0.000014005 0.000037823 -0.000045611 -0.000083091 0.000483806 0.000499945 0.001546269 -0.001216955 -0.003278377 0.000141678 0.000222026 0.000461436 -0.000666807 -0.001161772 -0.000302717 -0.000349627 -0.000891232 0.000914785 0.002125814 0.000041913 0.000037494 0.000109511 -0.000065084 -0.000207255 -0.000018741 -0.000017111 -0.000068585 -0.000019719 0.000064820 -0.000003695 -0.000035513 -0.000015360 0.000076344 0.000091801 -0.000010290 -0.000007362 -0.000023795 0.000025192 0.000041147 -0.000029841 -0.000020564 -0.000067211 -0.000005552 0.000107702 0.000020141 0.000012856 0.000048107 -0.000008053 -0.000091747 -0.000090367 -0.000054570 -0.000116445 -0.000250974 0.000317514 -0.000049596 -0.000086324 -0.000214016 -0.000305085 0.000304522 0.000385450 0.000504589 0.000922992 0.000225899 -0.001879642 0.000160802 0.000297855 0.000518544 -0.000320546 -0.000865463 0.000039686 0.000021711 0.000005364 -0.000467729 -0.000225174 0.000305287 0.000461972 0.000855928 0.000090610 -0.001642437 -0.000139751 -0.000146824 -0.000455156 0.000284668 0.000898697 -0.000074186 -0.000111993 -0.000275254 0.000457013 0.000691057 0.000092672 0.000108004 0.000271936 -0.000309587 -0.000692547 -0.000251909 -0.000275627 -0.000797644 0.000591680 0.001688003 -0.000168414 -0.000213003 -0.000529800 0.000739441 0.001309343 0.000257521 0.000307647 0.000776551 -0.000778786 -0.001823791 -0.000000949 -0.000012031 -0.000009223 0.000015526 0.000032879 0.000003646 0.000010374 0.000013279 -0.000022650 -0.000039793 -0.000010035 -0.000012553 -0.000030147 -0.000006191 0.000048782 -0.000005247 0.000011905 -0.000005857 -0.000051332 -0.000026643 0.000020604 0.000040701 0.000070109 -0.000036928 -0.000158730 0.000002373 -0.000009840 0.000002940 0.000045374 0.000029543 -0.000015168 -0.000021101 -0.000045417 -0.000008456 0.000079861 0.000014994 0.000022546 0.000049523 0.000023968 -0.000080810 0.000010764 0.000015087 0.000033748 0.000006110 -0.000061775 0.000005371 0.000004364 0.000015483 0.000009457 -0.000022628 0.000015299 0.000026866 0.000050954 -0.000001808 -0.000100149 -0.000003613 -0.000001429 -0.000006315 -0.000002749 0.000007825 -0.000006046 -0.000013371 -0.000023564 0.000001627 0.000049365 -0.000003234 -0.000002637 -0.000009751 -0.000014697 0.000009152 -0.000001141 -0.000002115 -0.000005228 -0.000001812 0.000010592 0.000002811 0.000002001 0.000007396 0.000012699 -0.000005265 -0.000000192 -0.000000222 -0.000001233 -0.000001177 0.000001992 -0.000005092 -0.000007531 -0.000018146 -0.000011226 0.000028656 0.000012141 0.000012737 0.000038134 0.000027289 -0.000053919 -0.000017373 -0.000029499 -0.000055776 0.000010426 0.000113958 0.000003647 0.000011846 0.000013236 -0.000023462 -0.000043648 0.000011915 0.000021028 0.000039640 -0.000001933 -0.000078600 0.000000642 0.000002658 0.000003548 -0.000000480 -0.000006537 -0.000003883 -0.000007865 -0.000012060 0.000005570 0.000026031 -0.000002478 -0.000000964 -0.000007465 -0.000014203 0.000005169 0.000003659 0.000009992 0.000014180 -0.000012490 -0.000035773 -0.000005567 -0.000013350 -0.000020477 0.000013912 0.000050265 0.000001969 0.000002345 0.000005231 0.000001021 -0.000008867 0.000003942 0.000005518 0.000012946 0.000009951 -0.000018874 -0.000004932 -0.000008101 -0.000017611 -0.000005346 0.000031352 -0.000037110 -0.000061818 -0.000121861 0.000016555 0.000244803 -0.000023067 -0.000014053 -0.000058425 -0.000027287 0.000086926 -0.000018287 -0.000019041 -0.000052901 -0.000018252 0.000086863 -0.000006657 -0.000012715 -0.000023969 0.000009920 0.000051133 0.000016869 0.000019193 0.000048524 0.000002408 -0.000089155 -0.000000759 -0.000008496 -0.000004390 0.000037844 0.000031025 0.000016668 0.000028695 0.000054227 -0.000015174 -0.000113376 0.000006669 -0.000003637 0.000014791 0.000043442 0.000002224 0.000011406 0.000014695 0.000034166 0.000003912 -0.000063926 -0.000005026 -0.000011756 -0.000016952 0.000019827 0.000044978 -0.000006907 -0.000014372 -0.000021751 0.000022934 0.000056968 -0.000002971 -0.000006385 -0.000010087 0.000010022 0.000023901 -0.000010747 -0.000017242 -0.000035120 0.000003656 0.000068783 -0.000002379 -0.000002063 -0.000007664 -0.000010197 0.000008142 -0.000007123 -0.000011867 -0.000022856 0.000002383 0.000047490 0.000002629 0.000000054 0.000007858 0.000017159 -0.000003537 -0.000000409 -0.000001880 -0.000002580 0.000001308 0.000005499 -0.000000644 -0.000002438 -0.000002233 0.000006665 0.000009863 0.000003980 0.000001115 0.000012136 0.000020294 -0.000008772 0.000000056 0.000013839 0.000003243 -0.000056716 -0.000044307 0.000001033 0.000005078 0.000003938 -0.000016803 -0.000019680 -0.000005515 -0.000017413 -0.000020276 0.000039801 0.000064865 0.000008943 0.000009617 0.000023699 -0.000003145 -0.000046182 0.000003524 0.000001222 0.000008096 0.000005948 -0.000011990 -0.000002354 -0.000000822 -0.000007937 -0.000015556 0.000004415 0.000007242 0.000009549 0.000021696 -0.000003139 -0.000042826 -0.000000267 -0.000000478 -0.000001035 0.000000646 0.000003365 0.000001937 0.000000651 0.000005937 0.000009033 -0.000005157 0.000004636 0.000004258 0.000014964 0.000014092 -0.000019239 0.000001203 0.000000057 0.000003862 0.000009563 -0.000000008 -0.024199021 -0.013992752 -0.003962477 0.013826435 0.021708637 -0.135048918 -0.059374595 0.009905046 0.006165326 -0.009230260 -0.067321509 -0.163380051 -0.005031749 -0.014815179 -0.024823642 -0.003818263 0.001455111 0.001187730 0.001022758 -0.000465124 -0.015964915 0.006467041 -0.002077648 -0.002722523 0.001062483 -0.024220509 0.010198428 0.000012359 -0.001803254 0.001115861 -0.000610423 -0.002781797 0.000222373 -0.000926580 0.002646329 0.005046094 -0.013734550 -0.002691214 -0.000137878 0.001544422 0.004616138 -0.019754569 -0.005333695 -0.001353792 0.003321158 0.000098401 -0.005041133 0.000205023 -0.001409871 -0.001193669 0.000476763 -0.012795631 -0.001013107 -0.004126298 -0.002101676 0.001568827 -0.017082655 -0.000026584 -0.003272442 -0.002406795 -0.039976696 0.013697210 -0.012321697 -0.019883947 0.014246331 -0.206961084 0.027961208 -0.002404764 -0.003161062 0.011113907 0.028795676 -0.095865007 0.003471627 0.026231061 -0.006667381 -0.006718441 0.008675650 0.001399675 -0.001008814 0.000182678 -0.015528993 0.020055090 0.003419108 -0.001326544 -0.003393021 0.006575300 -0.007160368 -0.002126982 0.001084117 0.002136525 -0.003255346 -0.007626331 0.000460623 -0.001254512 -0.001701967 -0.015191193 -0.024335624 0.000423490 -0.001237003 -0.002367020 0.006046125 0.011025317 0.001248290 -0.000657106 -0.000410487 -0.003661881 0.005457958 -0.000793903 -0.000438890 -0.002960650 0.000503116 0.017226148 -0.001832085 -0.005936954 0.000107473 0.002117910 -0.006029992 0.001274017 0.000496779 -0.000602287 0.105541063 -0.107516074 0.459198251 -0.078258926 0.242290091 0.318522994 -0.045349856 0.046272200 -0.000218885 0.352931981 0.044156352 -0.100051729 0.001204593 0.027444142 0.329663068 0.002607926 -0.009340326 -0.025577502 0.015731738 0.002852191 -0.003564087 0.009294120 -0.004060305 -0.071086323 0.011243965 0.012329182 -0.016192231 0.005776644 0.008315870 -0.047297621 0.001941310 -0.004343688 0.004522825 -0.048701934 0.028643812 0.005090425 0.009340284 0.004955226 -0.116171332 -0.062794280 -0.003160304 -0.015975748 -0.012025113 -0.061330897 -0.087414153 -0.001256128 -0.001961542 0.001819478 -0.031538480 -0.026894599 -0.003481651 0.006668610 0.008704446 -0.097646362 -0.019851015 0.014449506 -0.012221336 -0.017242251 -0.022195286 -0.043001264 0.003687991 -0.003720800 -0.002687358 0.058050777 0.018776686 0.018987865 -0.007445893 -0.004988669 -0.002664762 -0.000331239 -0.006317448 -0.084762292 -0.027562017 -0.011937273 0.007526712 -0.005584715 -0.044110302 0.005853350 -0.000481143 0.003113831 -0.005062632 0.009280237 0.003969757 0.004123129 -0.001537818 -0.002514841 0.001598648 0.006635384 0.000962065 -0.002003003 -0.000062768 -0.011045947 -0.008245373 -0.003413793 0.001594783 -0.000175260 -0.000416519 0.000886297 0.008564523 0.003250276 0.000769120 -0.000293503 -0.000768894 -0.004199283 -0.002729839 -0.000916806 0.000039213 0.001060182 0.014737850 0.002918538 -0.000544826 0.001839268 -0.000802135 -0.006073367 0.006502848 0.000634171 -0.000110055 0.000286245 0.002517965 -0.004791243 -0.003537711 0.005640256 -0.001334791 -0.009749476 0.013483602 0.000989434 -0.000113206 0.000488567 -0.006772795 -0.008996275 -0.000759674 0.001197435 -0.000133393 0.005314713 0.003780745 0.001859960 -0.000804418 0.000390884 -0.009363911 -0.016466677 0.000472264 0.001960964 0.000667008 -0.009468473 -0.001010572 0.001227171 0.001099484 -0.000005464 -0.010100282 -0.001971515 0.000599147 0.000498740 -0.000246492 -0.007757448 0.001357366 0.000067324 0.000376923 0.001111487 -0.004886244 0.006683645 0.000508568 0.000145563 0.001464017 -0.004212685 0.004713285 0.000273944 -0.000672888 0.000422332 -0.000119685 0.004114600 -0.000719028 -0.004803205 -0.003203070 0.007916715 -0.011897470 -0.000685335 -0.002347968 -0.001920742 0.008690103 -0.011893029 -0.000654541 -0.002959058 -0.001325596 0.005204138 -0.005349584 -0.002057510 0.003063628 0.003717783 -0.003878430 0.012641576 -0.001291274 0.001695346 0.001389933 -0.001649775 0.002487858 0.003084529 -0.002898134 -0.003272534 0.002892801 -0.014158528 0.001245589 0.000886780 -0.000148757 -0.009032979 -0.008438668 -0.000017658 0.000381245 0.000463262 -0.000307396 -0.003500926 -0.001544755 0.000630350 0.000750053 0.011679809 0.010592243 0.000450327 -0.000965256 -0.001759360 0.007739667 -0.006182738 -0.000235296 -0.000024573 0.000005516 0.003175895 -0.002673578 0.000125734 0.000095321 0.001995751 -0.010768975 0.005973033 0.001552558 -0.001255647 -0.002206107 -0.001090168 -0.001021475 -0.000270178 -0.000232523 0.000000861 -0.000571364 -0.000717510 0.000374442 0.001471683 0.000392185 0.000175066 -0.000292975 -0.000571544 -0.001723999 0.001622022 0.000023189 0.000598905 -0.000118702 -0.001133435 -0.000021437 0.000057120 -0.000803500 -0.000624758 0.001220706 0.002514189 0.000136303 0.000405956 0.000942414 -0.000191982 -0.000274724 -0.000536930 -0.000169869 -0.000569430 -0.000335705 0.000967892 -0.000045222 0.000681686 -0.000987575 -0.000877504 0.002110574 0.000051396 0.000504389 0.000106229 -0.000245382 -0.000166887 -0.000136129 0.000271644 0.000193727 -0.000545236 -0.000395060 -0.000140172 0.000559672 -0.000048480 0.000069436 -0.000056921 0.000078671 -0.000177649 -0.000122866 0.000279245 0.000231102 0.000086317 -0.000251367 -0.000070660 0.000189955 0.000106463 0.000034324 -0.000231813 -0.000036669 0.000156988 0.000176778 0.000034615 -0.000086377 0.000035534 -0.000066580 -0.000039521 -0.000014899 0.000078056 -0.000000362 -0.000060001 -0.000063372 0.000004046 0.000059680 -0.000064250 0.000271561 0.000192674 0.000066797 -0.000288663 -0.000070725 0.000316001 0.000238669 0.000075463 -0.000326457 -0.000111542 0.000234305 0.000018637 0.000098375 -0.000355111 0.000069151 -0.000292665 -0.000284989 -0.000005203 0.000218332 -0.000006889 -0.000040773 -0.000022857 0.000047277 0.000037230 0.000022902 -0.000057434 0.000041978 -0.000073134 0.000154112 0.000002460 -0.000077720 -0.000070146 0.000007695 0.000045063 -0.000062717 0.000045441 -0.000052620 0.000108903 -0.000126328 0.000013413 0.000011168 -0.000006581 -0.000008070 -0.000003196 0.000046669 -0.000092503 0.000027603 -0.000061364 0.000190931 0.000056813 -0.000173248 -0.000179571 -0.000050945 0.000131765 0.000012666 -0.000053567 -0.000042313 0.000003774 0.000052824 0.000017796 -0.000040533 -0.000019601 -0.000020191 0.000050462 0.000080951 -0.000249671 -0.000231224 -0.000075179 0.000198310 -0.000051528 0.000153573 0.000156633 0.000047030 -0.000118685 0.000028383 -0.000104969 -0.000123140 -0.000021939 0.000071700 0.000342609 -0.000814195 -0.000339090 -0.000315714 0.000973946 0.000137113 -0.000704472 -0.000235107 0.000056826 0.000808635 0.000416584 -0.001678813 -0.001969489 -0.000195655 0.000879456 0.000059327 -0.000052736 0.000023843 -0.000112773 0.000129236 -0.000011115 -0.000030176 -0.000024957 0.000040437 0.000017330 0.000048678 -0.000022507 0.000024715 -0.000075832 0.000066078 0.000025636 0.000012919 0.000027509 -0.000073897 0.000002425 0.000004189 -0.000005131 0.000013408 0.000004315 0.000027544 -0.000012179 0.000056813 0.000027314 -0.000013841 -0.000075365 0.000211108 -0.000507552 -0.000285208 -0.000358191 0.000602520 -0.000011970 -0.000047622 -0.000038739 0.000153242 0.000047449 -0.000110722 0.000430951 0.000272032 -0.000090961 -0.000590487 -0.000124894 0.000405024 0.000270640 -0.000000586 -0.000499187 -0.000061188 0.000138512 0.000069666 0.000063275 -0.000202343 -0.000214500 0.000505869 0.000248549 0.000363583 -0.000773948 0.000379185 -0.000853981 -0.000403539 -0.000780080 0.001062080 -0.000036592 -0.000112764 -0.000160786 0.000472619 0.000222917 0.000054420 -0.000275009 -0.000214118 0.000209062 0.000313907 -0.000074308 0.000129566 0.000014298 0.000193280 -0.000276926 0.000020454 -0.000101114 -0.000020985 0.000056483 0.000244221 0.000167391 -0.000416773 -0.000209213 -0.000221252 0.000701425 0.000100653 -0.000168878 -0.000038825 -0.000316020 0.000296398 0.000054509 -0.000153329 -0.000035183 -0.000097010 0.000232738 0.000106533 -0.000206917 -0.000068209 -0.000304736 0.000303790 -0.000001465 0.000037194 0.000045491 -0.000061593 -0.000018131 0.000009022 0.000052710 0.000047981 -0.000122419 -0.000075055 0.000023476 -0.000075094 -0.000040007 -0.000014686 0.000099144 -0.000049471 0.000022527 -0.000005594 0.000250939 -0.000052404 -0.000059500 0.000410161 0.000268035 -0.000308448 -0.000572624 -0.000031442 0.000116836 0.000049370 -0.000009176 -0.000162952 -0.001874417 0.003485588 0.001515455 0.005121268 -0.004431723 -0.000739091 0.001456328 0.000316391 0.001743410 -0.001477429 0.000422456 -0.002680649 -0.002291047 0.001672074 0.007600461 -0.000104382 0.000193553 0.000111750 0.000267322 -0.000220676 0.000022144 -0.000012622 -0.000065702 -0.000031889 0.000028053 0.000045856 -0.000144386 -0.000037506 -0.000073973 0.000188607 0.000019811 -0.000041322 -0.000035641 -0.000027643 0.000072226 0.000039430 -0.000065397 -0.000068949 -0.000072087 0.000066742 -0.000035633 0.000078489 0.000053100 0.000049472 -0.000093426 -0.000107047 0.000094056 -0.000193596 0.000189147 -0.000331752 0.000048132 0.000019079 -0.000101818 -0.000138505 -0.000087269 -0.000195010 0.000944525 0.001221085 0.000059782 -0.000395739 -0.000324440 0.000916026 0.000611073 0.000266318 -0.000858189 -0.000042202 0.000471750 0.000306583 -0.000082760 -0.000429477 -0.000283836 0.001016748 0.001052905 0.000164502 -0.000682558 0.000628566 -0.000869843 -0.000183612 -0.002011440 0.000266006 0.000606818 -0.000840540 0.000019625 -0.002094995 -0.000233192 -0.000043297 0.000907570 0.000960168 -0.001090262 -0.002662215 0.000888017 -0.001771827 -0.000978143 -0.002361348 0.002909652 0.000613748 -0.001650164 -0.000752564 -0.001005958 0.002956067 -0.000528024 0.002200463 0.001668879 -0.000317324 -0.005169325 0.000004928 -0.000038346 -0.000024046 0.000020273 0.000046601 -0.000012275 0.000051463 0.000028526 -0.000006456 -0.000064900 0.000022360 -0.000035615 -0.000020799 -0.000041266 0.000037636 -0.000002153 0.000067308 0.000028758 -0.000066127 -0.000101839 -0.000055654 0.000162726 0.000095240 0.000040664 -0.000199346 0.000003336 -0.000063605 -0.000030817 0.000049645 0.000091927 0.000030762 -0.000058249 -0.000037905 -0.000050989 0.000062310 -0.000028748 0.000045094 0.000036475 0.000057589 -0.000040164 -0.000018536 0.000042043 0.000035418 0.000025863 -0.000039474 -0.000009420 0.000009626 0.000009986 0.000026888 -0.000004036 -0.000033073 0.000081712 0.000055462 0.000037903 -0.000088208 0.000008009 -0.000006504 0.000001434 -0.000022673 0.000009091 0.000012619 -0.000039309 -0.000030742 -0.000007969 0.000040112 0.000003763 0.000005484 -0.000000881 -0.000018460 -0.000012773 0.000000581 -0.000005019 -0.000008915 0.000000946 0.000001344 -0.000004018 -0.000005792 -0.000003040 0.000019382 0.000011005 -0.000000227 0.000000187 -0.000002080 -0.000000418 -0.000002666 0.000008221 -0.000012023 -0.000014853 -0.000018066 0.000005548 -0.000020711 0.000018662 0.000023094 0.000058114 -0.000004690 0.000038984 -0.000100627 -0.000064495 -0.000040638 0.000115111 -0.000009002 0.000053033 0.000034720 -0.000020857 -0.000067446 -0.000025622 0.000064621 0.000044065 0.000027235 -0.000070910 -0.000003285 0.000006273 0.000002194 0.000003255 -0.000008716 0.000011476 -0.000028012 -0.000011027 -0.000010901 0.000036464 0.000001360 0.000009525 -0.000000773 -0.000015199 -0.000019720 -0.000012079 0.000040228 0.000021504 0.000003322 -0.000050251 0.000013572 -0.000050997 -0.000034899 0.000001005 0.000061359 -0.000004744 0.000007111 0.000002444 0.000010848 -0.000007838 -0.000007037 0.000006876 0.000006608 0.000019212 -0.000002648 0.000009281 -0.000019468 -0.000017842 -0.000015352 0.000016469 0.000083340 -0.000210467 -0.000140682 -0.000095288 0.000235181 0.000034794 -0.000041847 -0.000043703 -0.000086227 0.000029501 0.000029788 -0.000049681 -0.000047786 -0.000058463 0.000038747 0.000019842 -0.000049215 -0.000028930 -0.000025590 0.000057442 -0.000031407 0.000067099 0.000052196 0.000051590 -0.000067249 0.000013683 -0.000059891 -0.000020673 0.000007103 0.000095131 -0.000037879 0.000103399 0.000066751 0.000033424 -0.000120075 -0.000001545 -0.000041918 -0.000009540 0.000048927 0.000072916 -0.000018673 0.000044041 0.000039191 0.000025160 -0.000040803 0.000015699 -0.000054900 -0.000027658 -0.000002124 0.000075927 0.000019333 -0.000066580 -0.000036821 -0.000004638 0.000086903 0.000011207 -0.000030575 -0.000011802 -0.000009649 0.000043991 0.000024259 -0.000058571 -0.000038469 -0.000029067 0.000065842 0.000002837 0.000002843 -0.000002119 -0.000013037 -0.000009326 0.000012595 -0.000037599 -0.000030383 -0.000009238 0.000038334 -0.000000428 -0.000014380 -0.000000281 0.000014997 0.000028327 0.000002481 -0.000006226 -0.000002459 -0.000002501 0.000008058 0.000001664 -0.000012944 -0.000008979 0.000005962 0.000016186 -0.000004324 -0.000012254 0.000001102 0.000028572 0.000029222 -0.000014620 0.000089101 0.000032672 -0.000036435 -0.000138699 -0.000004242 0.000029657 0.000017214 -0.000015515 -0.000040771 0.000022773 -0.000089056 -0.000043541 0.000004707 0.000122336 -0.000016801 0.000038780 0.000026612 0.000024836 -0.000043893 -0.000002361 0.000001820 0.000009285 0.000007586 0.000004981 0.000001942 0.000011149 0.000000781 -0.000017716 -0.000023395 -0.000014304 0.000035806 0.000026774 0.000016201 -0.000037497 -0.000000848 -0.000001903 -0.000005345 0.000005442 -0.000000163 -0.000001516 -0.000005233 0.000002533 0.000010798 0.000014413 -0.000005832 0.000001194 0.000009314 0.000019028 0.000010004 -0.000001645 -0.000007888 -0.000004068 0.000013454 0.000013118 -0.000030991 -0.005181935 0.003789246 0.000351116 0.000643050 -0.004703282 0.006171949 0.003989632 0.000089931 -0.003068085 0.002481162 -0.000977688 -0.001757087 0.000236271 0.001153140 0.000014615 -0.000010659 0.000110079 -0.000039416 0.000012559 0.000127073 0.000586599 -0.000176717 -0.000186311 -0.000189806 -0.000441489 0.000908839 0.000166093 -0.000069786 -0.000377989 -0.000066477 -0.000741823 -0.000955962 -0.000218285 0.000661584 0.000887249 -0.001651825 -0.000580930 -0.000140679 0.000736784 0.001333489 -0.002662333 -0.001542401 -0.000561399 0.001298704 0.000296743 0.000217001 -0.000559170 -0.000068824 0.000001106 0.000468290 0.000385460 -0.001338452 -0.000109089 0.000261686 0.000863867 -0.000055934 -0.001480439 -0.000248618 0.000546360 -0.002514678 -0.006575192 -0.005965956 0.000859782 0.002569199 0.000601812 -0.003068136 -0.004006400 0.001124728 0.002027147 -0.000937395 0.001033221 0.001260958 0.002307796 -0.000100851 0.000059057 0.000503883 -0.000049276 0.000008177 0.000090063 0.000370621 0.001960453 0.001724258 0.000063499 -0.000933634 0.000688978 -0.001602188 -0.001038269 -0.001204028 0.001379644 -0.000191521 0.001318215 0.000833211 -0.002236371 -0.000538934 0.000967728 0.001839461 0.000408564 -0.001048311 0.001172465 0.000668793 0.001445156 -0.000713219 0.001165251 -0.000236396 0.000345958 0.001305293 0.000472337 -0.000431180 -0.000413547 0.000031899 0.000327396 -0.000733151 -0.000471232 -0.000213710 0.000556172 0.001108613 0.000104150 -0.001032299 0.000193166 0.369796815 -0.048755407 0.498144425 0.023949439 0.021008203 0.519516108 -0.141890428 -0.050161878 0.020766318 0.465283816 -0.027447549 -0.000650271 -0.005666837 -0.002169728 0.504962094 -0.021576957 0.003973175 0.007764431 0.002109938 -0.039755301 -0.060450445 -0.010897720 -0.011201785 -0.000395352 -0.028258676 0.057167247 0.009141547 0.002181943 -0.007684836 -0.007952301 0.022050658 -0.004424418 0.002531651 0.004642986 -0.010837088 -0.109570399 0.011940299 0.004074504 -0.009730146 -0.005715500 0.003889327 0.000822997 -0.000655324 -0.000885132 0.000470002 0.004367603 0.001352791 -0.001097328 -0.000831426 0.002057086 -0.001464535 -0.000063559 -0.000547509 0.000505707 -0.000111138 -0.001864594 -0.000723615 0.000248690 0.000492263 -0.000782279 -0.000795875 -0.000224654 0.000269538 0.000067229 -0.000160662 0.003369053 0.000724401 -0.000458042 -0.000656626 0.000666744 -0.008588277 -0.150015897 -0.049010419 0.126037057 0.000088424 0.002817395 -0.053505147 -0.065113589 0.056094895 0.000238237 -0.010443290 0.138832066 0.057058506 -0.196055481 -0.000420659 0.004577825 -0.147079039 0.133199309 0.031426475 0.000453944 -0.001579599 0.129966376 -0.211111006 -0.038470043 -0.000230871 0.006569112 0.021796417 -0.026809699 -0.045442648 0.001124518 -0.001319110 -0.131842098 -0.121498273 -0.052234053 -0.000351070 0.003377022 -0.113461045 -0.191889706 -0.070796135 0.000761993 -0.004184554 -0.056754123 -0.081375012 -0.076944105 -0.001287429 0.006551506 0.000950472 0.000265260 -0.000216347 -0.225009103 0.010781345 0.001111898 -0.000081322 -0.000357196 -0.024974912 0.006531436 0.000653548 0.000153245 -0.000296392 0.125645341 -0.014161806 -0.002055847 -0.003232063 -0.000403405 -0.072492996 -0.015143163 -0.002696696 -0.002495051 -0.000372229 0.023916933 -0.006962850 -0.000905254 -0.000965286 0.000404468 -0.082359219 0.000035414 0.000103922 0.001652057 0.000514121 -0.084003609 -0.000293062 -0.000172041 0.001107853 0.000435997 0.108026926 -0.001362806 -0.000149085 0.001269265 0.000147691 0.013700178 0.000228630 0.000018805 -0.000746942 -0.000364075 0.001336974 0.001206227 0.000508827 -0.000213620 -0.000433360 0.000597267 -0.002566527 -0.000650368 0.000998349 0.000484268 -0.001166793 -0.008507856 0.000925344 0.000950685 -0.000361623 -0.002118533 -0.002984620 0.000497104 0.000226887 0.000020289 -0.000902239 0.006632681 -0.001489117 -0.000912193 0.001023011 0.003091219 0.011972402 -0.002776949 -0.000511013 0.002666074 0.000542590 0.000943561 -0.000404854 0.000315165 0.000279914 0.000024376 -0.011592882 0.003537742 0.000878400 -0.002395421 0.000178565 0.000534521 0.000135281 0.000096785 -0.000152381 0.000205782 0.000434621 0.000068685 0.000055609 -0.000130852 0.000105677 0.000490780 0.000019255 0.000076247 -0.000028010 0.000062324 -0.000489843 -0.000048789 -0.000028842 0.000075380 -0.000076292 0.000435438 -0.000012804 0.000139148 -0.000062850 0.000051323 -0.000248658 -0.000023621 -0.000042480 0.000061047 -0.000044292 0.000228071 0.000069882 0.000001699 -0.000083844 0.000084892 0.000003316 0.000031338 -0.000103371 0.000030270 -0.000012352 -0.000262833 -0.000021898 -0.000038117 0.000050290 -0.000051750 0.000023898 0.000029641 -0.000054885 0.000005554 0.000019354 0.000084281 0.000034164 -0.000107129 -0.000000030 -0.000034492 0.000060556 -0.000012184 0.000032986 -0.000017001 0.000001562 -0.000077271 -0.000021686 0.000049233 0.000006686 0.000002642 -0.000033586 -0.000006140 0.000047922 0.000002928 0.000023038 -0.000054749 -0.000012405 0.000016118 0.000005810 -0.000007906 0.000011015 0.000002411 -0.000013830 -0.000001032 -0.000005664 0.000025650 0.000000283 -0.000013751 -0.000005168 -0.000011607 -0.000052087 -0.000015370 0.000052969 0.000002574 0.000017832 -0.000053412 -0.000016398 0.000059997 0.000001500 0.000021103 0.000044073 -0.000015908 0.000066692 -0.000017297 0.000023978 0.000081351 0.000004958 -0.000043411 -0.000010287 -0.000026785 -0.000005656 -0.000008884 -0.000007946 0.000002332 -0.000025636 -0.000057549 0.000011003 -0.000025321 0.000015884 -0.000002102 0.000022386 0.000001168 -0.000008870 -0.000002024 -0.000003393 0.000038802 -0.000020882 0.000023340 -0.000013324 -0.000018993 0.000043577 0.000000706 0.000001894 -0.000011066 -0.000003082 -0.000037947 0.000008756 -0.000034886 0.000012415 -0.000014938 0.000064042 0.000015303 -0.000027399 -0.000007821 0.000002139 0.000008638 -0.000000988 -0.000010497 -0.000001223 -0.000009416 0.000000260 0.000004191 -0.000009478 0.000001512 0.000000273 0.000070308 0.000021461 -0.000037170 -0.000006375 0.000002839 -0.000049852 -0.000013730 0.000023018 0.000005370 -0.000001921 0.000042831 0.000007231 -0.000014229 -0.000006616 -0.000001136 0.000077216 0.000066918 -0.000179797 0.000012021 -0.000034099 0.000047193 -0.000017254 -0.000156163 0.000002811 -0.000148324 0.000790345 0.000096587 -0.000177067 -0.000127043 -0.000005481 -0.000013227 0.000022696 -0.000021674 0.000007242 0.000020289 0.000020160 -0.000008955 -0.000004000 -0.000005110 -0.000018685 -0.000004160 0.000014104 -0.000010525 0.000002447 0.000017911 -0.000021276 0.000016537 -0.000000674 0.000007155 0.000033689 -0.000010743 -0.000002525 -0.000005267 0.000002149 -0.000009256 0.000004013 0.000003722 0.000013899 -0.000001931 0.000022988 -0.000224894 0.000023268 -0.000205632 0.000060445 0.000051003 0.000072812 -0.000006105 -0.000001875 -0.000013292 -0.000192315 -0.000144601 0.000049281 0.000130662 0.000010227 0.000160832 -0.000091607 0.000015250 0.000115731 0.000036596 -0.000032256 0.000075853 0.000001160 0.000080738 0.000009731 -0.000204822 0.000382718 0.000029839 0.000291742 -0.000091350 -0.000187389 -0.000466370 0.000064994 -0.000161506 0.000474363 0.000457467 0.000439383 0.000227981 0.000288331 -0.000101631 -0.000165478 0.000248531 -0.000002051 -0.000084872 0.000119230 -0.000326132 0.000271284 -0.000048830 0.000101723 -0.000034450 -0.000322514 -0.000147317 -0.000063603 -0.000043022 0.000030174 0.000126793 -0.000205002 -0.000105282 -0.000248601 0.000037843 0.000285123 -0.000221433 0.000028029 -0.000124249 0.000088301 0.000183018 -0.000253561 0.000007379 -0.000084375 0.000044311 0.000106887 -0.000304853 0.000057334 -0.000114695 0.000087337 0.000245781 -0.000112435 0.000006715 -0.000015171 0.000026462 0.000073973 -0.000098157 0.000028680 0.000007640 0.000025077 0.000130601 -0.000015035 -0.000001322 -0.000025646 0.000002923 0.000012017 0.000122954 -0.000028725 0.000040436 -0.000029437 -0.000240067 -0.000246738 0.000079503 0.000113212 0.000049417 0.000188043 0.000066418 0.000017110 0.000065347 -0.000026547 0.000095941 0.003384689 -0.000189492 0.001889066 -0.001246226 -0.001961227 0.002958053 -0.000556135 0.000459263 -0.001121051 -0.000587144 0.003903900 -0.003571560 0.000503560 -0.002782765 0.000278091 0.000137665 -0.000082683 0.000116720 -0.000053156 -0.000072115 0.000172933 -0.000027129 -0.000007341 -0.000001356 -0.000014936 -0.000227626 0.000014514 -0.000091652 -0.000036074 0.000066741 0.000008966 -0.000008050 -0.000031973 -0.000004197 0.000011927 0.000036766 0.000016064 -0.000026287 -0.000000600 0.000016296 -0.000003265 -0.000011207 0.000025184 -0.000006328 -0.000012312 0.000098635 -0.000031102 0.000056748 -0.000029367 -0.000010007 0.000054524 0.000035632 0.000018616 -0.000008889 0.000069372 -0.000504244 -0.000047589 0.000083645 0.000086962 0.000002327 -0.000204400 -0.000068735 0.000160005 0.000015021 0.000020606 -0.000124555 0.000014548 0.000086155 0.000019790 0.000091449 -0.000409663 -0.000060589 0.000134119 0.000061727 0.000018903 -0.001947926 0.001052574 -0.000811860 0.001320779 0.000591211 -0.002643729 0.001104253 -0.002068143 0.001817647 0.000389983 -0.002561853 0.001343192 -0.000341423 0.001236382 0.000108319 -0.000722613 -0.000487445 -0.000790365 -0.000513696 0.000933590 -0.001004052 -0.001207153 -0.001503081 0.000088355 0.000700527 -0.001932042 0.001909839 0.000342072 0.001603540 -0.000714556 0.000009955 -0.000004566 -0.000007891 -0.000001981 -0.000021066 -0.000002555 0.000003007 0.000014035 0.000000057 0.000012821 -0.000001694 0.000009823 -0.000008084 0.000002937 0.000013962 -0.000012691 0.000017727 0.000018344 0.000004745 0.000054790 0.000001524 -0.000003133 0.000046802 -0.000003662 -0.000000962 0.000006597 -0.000015824 -0.000019516 -0.000003364 -0.000035227 -0.000001036 0.000011390 -0.000014144 0.000003826 0.000016502 -0.000006531 -0.000013759 0.000008512 -0.000001966 -0.000020956 -0.000009855 -0.000005906 0.000008951 0.000000461 -0.000007065 0.000001668 -0.000006238 0.000002031 -0.000001478 -0.000015381 -0.000009009 -0.000008201 0.000018623 -0.000001318 -0.000004572 -0.000011432 0.000004978 -0.000003033 0.000004235 0.000012570 0.000009873 0.000001681 -0.000008175 -0.000001248 -0.000003067 0.000002367 0.000005130 0.000003044 0.000000252 0.000009667 0.000006717 -0.000000191 -0.000000393 -0.000001805 -0.000000587 0.000002658 -0.000005535 -0.000002798 -0.000001915 -0.000009769 0.000002430 0.000000408 0.000000702 -0.000000484 0.000000211 0.000007760 0.000004757 -0.000000845 -0.000000941 0.000006670 -0.000004612 -0.000014285 0.000002084 -0.000001621 -0.000028845 0.000002525 0.000007168 -0.000026460 0.000002649 0.000006417 -0.000013756 0.000006999 0.000014389 0.000003744 0.000020559 -0.000008570 -0.000005356 0.000015099 -0.000000154 -0.000002694 -0.000000099 -0.000000387 0.000001503 0.000000241 -0.000000037 -0.000006234 0.000002092 -0.000007444 0.000002788 0.000000241 0.000005743 0.000004705 0.000004639 -0.000000730 0.000008732 0.000001822 0.000000431 0.000010986 -0.000001032 0.000004418 0.000010161 -0.000002478 -0.000013970 -0.000002572 -0.000008076 0.000005259 -0.000002667 0.000001985 -0.000002203 -0.000004960 0.000000277 -0.000005180 0.000000303 -0.000001423 -0.000008015 0.000006755 0.000003596 -0.000003532 -0.000000777 0.000004632 0.000007332 0.000016307 -0.000055719 0.000004292 0.000027515 0.000001663 0.000018285 -0.000012907 0.000003713 0.000050721 0.000019068 0.000013467 -0.000009740 -0.000001142 0.000022616 -0.000005621 0.000004075 -0.000014214 0.000002971 0.000008693 -0.000009011 -0.000010285 0.000017699 -0.000001203 -0.000019249 -0.000032421 -0.000009085 -0.000027288 0.000006712 -0.000004024 -0.000002794 -0.000004694 0.000028326 -0.000001791 -0.000004201 -0.000012750 -0.000015242 -0.000016690 0.000000522 -0.000031163 -0.000016165 -0.000005027 0.000009602 0.000002358 -0.000007405 -0.000014234 -0.000003484 -0.000020280 0.000003125 -0.000002544 -0.000003920 -0.000002465 -0.000021272 0.000001624 -0.000004457 -0.000015243 0.000000253 -0.000011895 0.000004261 0.000002704 0.000000845 0.000005348 -0.000015608 0.000001897 0.000007305 0.000002903 0.000003891 0.000002440 -0.000000015 0.000006612 0.000011924 0.000001327 -0.000008448 -0.000002165 -0.000000572 -0.000009449 -0.000005116 -0.000007111 0.000001734 -0.000009305 -0.000001991 0.000000577 -0.000001656 0.000000754 -0.000000192 0.000004978 -0.000002258 -0.000003580 -0.000001594 -0.000004478 -0.000011696 -0.000009440 -0.000008347 0.000000472 -0.000013311 0.000030589 0.000016063 0.000035461 -0.000005425 0.000027250 -0.000006852 0.000005565 0.000008922 0.000002514 0.000012505 -0.000011920 -0.000006337 -0.000029775 0.000003063 -0.000012589 0.000002859 -0.000003853 0.000012521 -0.000002190 -0.000011076 -0.000013535 -0.000001466 -0.000001024 0.000003232 -0.000005323 0.000006502 0.000006103 0.000006387 -0.000000435 0.000009187 -0.000009682 -0.000003050 0.000008392 0.000001080 -0.000003712 0.000012479 -0.000001601 0.000000981 -0.000003677 -0.000003412 -0.000009867 -0.000003790 -0.000004387 0.000001695 -0.000005234 -0.000011702 -0.000005777 -0.000003318 0.000001758 -0.000008579 0.000003594 -0.000004314 -0.000003010 -0.000001893 -0.000007226 0.000333947 0.000017806 -0.000178031 -0.000053178 0.000000134 0.000241849 -0.000093653 0.000308140 -0.000032558 -0.000067395 -0.000330350 -0.000076674 -0.000031172 -0.000022867 -0.000023643 0.000018256 0.000013522 -0.000004048 0.000022697 -0.000011672 0.000251377 0.000049682 -0.000030693 -0.000031641 0.000007447 0.000113232 0.000016430 0.000035139 0.000009036 -0.000001854 0.000042075 0.000054911 -0.000063124 0.000034510 0.000029866 -0.000168252 -0.000007196 -0.000029765 0.000108618 0.000029943 -0.000190406 0.000006675 -0.000086642 0.000114973 0.000102770 -0.000019929 -0.000017796 0.000003593 0.000003053 0.000002253 -0.000103318 0.000005844 0.000007674 0.000019727 0.000022875 -0.000067027 0.000009426 -0.000038659 0.000023182 0.000018397 -0.001282849 -0.000676541 0.000999570 -0.000210390 0.000170275 -0.000670499 -0.000119291 -0.000353357 0.000428997 -0.000270072 -0.000073044 0.000492466 -0.001587119 -0.000475005 -0.000321215 0.000326263 -0.000735656 0.000730685 0.000284368 0.000005022 0.000133744 0.000405836 -0.000396134 -0.000339827 0.000029835 -0.001533820 -0.000070460 0.000625930 0.000089057 0.000292503 0.002677350 0.000386321 -0.000306206 -0.000181450 -0.000268858 0.000878139 0.000109242 -0.000107635 -0.000137284 0.000436984 0.000522254 0.000132192 -0.000149560 0.000160978 -0.000030183 0.000018244 0.000012168 0.000337228 0.000013417 0.000052448 0.001243089 0.000382534 -0.000537916 -0.000086920 -0.000106517 0.000372381 0.000036795 0.000242336 0.000059911 0.000015037 0.468290459 -0.032558983 0.508788276 -0.003239840 0.011684580 0.483355162 0.001966527 0.009386131 -0.007363785 0.525522252 -0.001442965 0.007428313 0.057672099 0.010636856 0.467045677 0.000188752 -0.000521625 -0.000068249 0.000798384 -0.000286453 -0.002334831 -0.000709405 0.000592839 0.000212764 -0.000441631 -0.000971687 0.000386793 0.000104553 -0.000953948 0.000155847 0.000407525 0.000409596 -0.000100760 -0.000688442 0.000210283 0.000302771 0.000157660 0.000164728 0.000201569 0.000172300 -0.000431609 -0.000519450 0.000289120 0.000439326 -0.000208862 -0.000359331 0.001411572 -0.001531884 0.000753232 -0.002653675 -0.000155966 -0.000390008 0.000472038 0.000476549 0.000723798 -0.000566501 0.001915716 -0.002932993 0.001285497 -0.003063335 -0.000583265 -0.000345001 0.000285728 -0.000523401 0.000295795 -0.000245835 0.000281298 -0.000598015 0.000632892 -0.000284798 -0.001020023 -0.000260210 0.001339907 -0.001521259 0.000919145 0.001345982 -0.002547716 0.000132671 0.000724404 0.000406779 -0.000547076 0.001622824 -0.000297092 -0.000071509 -0.000737751 0.002182021 -0.003350585 0.000728384 0.000673197 0.000981610 -0.017456176 0.139103297 -0.000644712 -0.000939510 -0.000971150 -0.045125904 0.022276409 -0.002781924 -0.002135730 -0.001824213 0.015279422 -0.136764197 -0.001630265 -0.001963368 -0.000673331 0.029224816 -0.087684772 0.001422300 0.000659820 0.001171063 -0.058016187 0.060500752 0.001340307 0.000357759 0.000679675 0.070811763 -0.272146834 0.000548555 -0.000120577 0.000518715 0.094918846 0.010760023 -0.000324855 0.001630091 0.000453301 -0.270673314 -0.022354573 -0.000451294 0.000932295 0.000016533 -0.026761220 -0.045272645 -0.000195308 0.000214706 -0.000305316 -0.001105401 -0.000912874 -0.093837532 0.106675804 0.034669799 -0.000360802 -0.000483861 0.096670686 -0.240250615 -0.070222780 0.000596526 0.000593504 0.036461666 -0.081268051 -0.069327136 -0.000448645 0.003186862 -0.196565363 -0.126746452 -0.067572142 0.000530571 0.001071678 -0.122229137 -0.145428143 -0.050707643 0.000356354 -0.003510162 -0.056418446 -0.043591884 -0.062503230 0.000702156 -0.001176568 -0.090556018 0.046141260 -0.091641308 -0.000068025 -0.000294087 0.051256237 -0.093333334 0.091887666 -0.000943190 0.000884605 -0.104366194 0.094371761 -0.220612111 0.000018390 -0.000103905 -0.000032074 0.000821928 0.000182914 0.000064759 -0.000098797 -0.000291997 -0.000145521 -0.000088171 0.000086451 -0.000107013 -0.000106339 0.000171504 -0.000207561 -0.000050983 0.000068944 -0.000039914 -0.000293730 -0.000014470 0.000091624 -0.000060994 -0.000083178 0.000364722 0.000117514 -0.000016555 0.000041113 -0.000011142 -0.000086587 -0.000012937 -0.000018483 -0.000057014 -0.000094322 0.000177966 0.000001153 -0.000072094 0.000007616 0.000143060 -0.000185436 -0.000072436 -0.000033984 0.000038213 0.000039311 -0.000114256 -0.000048863 -0.000071583 0.000000839 0.000021647 -0.000034160 -0.000010086 -0.000126465 -0.000008073 0.000013489 -0.000080100 -0.000020581 0.000065762 -0.000010342 -0.000008298 0.000026746 -0.000005557 0.000051260 0.000012639 -0.000012805 0.000033105 0.000017739 0.000060844 0.000003797 0.000001053 0.000035560 0.000006499 0.000003118 0.000006120 -0.000008921 0.000009760 0.000010477 -0.000021126 -0.000002452 0.000000174 -0.000011382 -0.000002924 -0.000011908 -0.000003555 -0.000002400 -0.000009272 -0.000004454 0.000068894 0.000009263 -0.000006718 0.000042626 0.000013757 0.000074678 0.000007390 -0.000004352 0.000046348 0.000012607 0.000115413 -0.000005242 -0.000007962 0.000055434 0.000000358 -0.000032674 -0.000009545 -0.000002842 -0.000031609 -0.000012740 -0.000002415 0.000002846 -0.000010320 -0.000009741 0.000004208 -0.000056506 0.000008598 0.000007649 -0.000022938 0.000004210 0.000000572 0.000002871 -0.000001416 -0.000008034 -0.000001449 0.000047210 -0.000005589 -0.000018476 0.000015842 0.000000812 -0.000007469 -0.000018014 0.000000884 0.000001588 -0.000011363 -0.000069248 0.000001679 0.000004111 -0.000029991 0.000001418 -0.000020143 -0.000009689 0.000009210 -0.000016003 -0.000013488 -0.000011613 -0.000000199 -0.000002853 -0.000008403 -0.000000701 -0.000013351 0.000000501 0.000002898 -0.000007017 -0.000001323 -0.000032650 -0.000010398 0.000013909 -0.000025300 -0.000016817 0.000018714 0.000007431 -0.000008436 0.000014450 0.000011248 -0.000008576 -0.000006805 0.000003993 -0.000008179 -0.000008687 -0.000263848 -0.000020504 0.000043189 -0.000145370 -0.000040912 -0.000206968 -0.000007533 -0.000037327 -0.000145899 -0.000006644 -0.000013053 -0.000116019 0.000054796 -0.000099248 -0.000145599 -0.000047445 -0.000004266 0.000020655 -0.000015660 -0.000008649 -0.000000892 -0.000003912 -0.000009415 -0.000005703 -0.000000909 -0.000030451 -0.000005155 0.000013899 -0.000006728 -0.000006706 -0.000003104 0.000006729 0.000017487 0.000003859 -0.000000517 -0.000013038 0.000000228 -0.000003411 -0.000004990 0.000002250 0.000019531 -0.000001349 0.000007105 0.000013306 -0.000002024 0.000143536 -0.000122006 0.000056528 -0.000068140 0.000061269 -0.000084798 0.000140692 -0.000034643 -0.000016126 -0.000011475 0.000179679 0.000026530 0.000059683 0.000083679 0.000000661 0.000027421 0.000260134 0.000016280 0.000066901 0.000004138 -0.000650505 0.000026586 0.000001534 0.000048798 -0.000016815 0.000529779 -0.000477420 -0.000030074 0.000093581 -0.000098631 -0.000241372 -0.000047151 0.000100998 -0.000111224 0.000149590 -0.000524722 0.000358403 -0.000104748 -0.000053322 -0.000102284 -0.000215526 -0.000270186 -0.000071939 -0.000051001 -0.000043829 -0.000024845 -0.000360443 -0.000039226 0.000025434 -0.000072795 -0.000020054 0.000124181 -0.000007457 -0.000020332 0.000022950 -0.000076049 0.000414426 0.000008582 -0.000075105 0.000066731 0.000035991 0.000226977 0.000052336 -0.000012781 0.000073328 0.000054394 0.000142196 0.000021151 -0.000029718 0.000061841 0.000029683 0.000231332 0.000053286 -0.000033106 0.000079946 0.000059876 0.000092704 0.000017180 0.000007935 0.000026109 0.000104650 0.000078256 0.000039047 0.000021213 0.000017054 -0.000020841 0.000013098 -0.000000672 -0.000012795 0.000005811 -0.000250771 -0.000106532 -0.000051719 -0.000008936 -0.000033117 0.000348340 0.000038518 0.000104813 0.000091383 0.000011564 0.000088540 -0.000181063 0.000003300 0.000018543 -0.000031742 -0.000564994 -0.001016752 -0.000798087 0.000316973 -0.000950248 0.000119046 -0.000434441 -0.000299523 0.000337472 -0.000703516 -0.000273063 0.001136060 -0.000846555 -0.000501887 -0.000649821 -0.000009022 -0.000053461 -0.000043701 0.000023336 -0.000047897 -0.000005889 -0.000046661 -0.000001870 0.000006735 -0.000039989 -0.000002512 0.000098742 0.000014985 -0.000028850 0.000053563 -0.000003554 0.000012478 0.000000856 -0.000006634 0.000001263 -0.000022736 0.000000022 0.000012021 -0.000004678 -0.000006053 0.000034360 -0.000000814 -0.000005798 0.000010559 -0.000002154 0.000131634 -0.000006872 -0.000028578 0.000051470 0.000002540 0.000033248 -0.000012100 0.000038207 0.000028927 -0.000021361 -0.000034823 0.000074570 -0.000025661 0.000039500 0.000088252 0.000181703 0.000036127 -0.000044070 0.000122101 0.000057104 0.000086006 0.000019194 0.000026267 0.000077244 0.000016937 0.000077565 0.000063720 -0.000033565 0.000086064 0.000081869 0.000224151 0.000305371 0.000426619 -0.000015929 0.000440886 -0.000021217 0.000071208 0.000430036 -0.000106021 0.000663758 0.000086706 -0.000147050 0.000454425 0.000158306 0.000446311 0.000347041 0.000338167 0.000277452 -0.000123509 0.000250404 -0.000060310 0.001187673 -0.000010836 -0.000358141 0.000380927 0.000213359 -0.000960952 0.000390471 0.000324501 0.000233219 -0.000012610 -0.000004279 -0.000006913 -0.000008927 -0.000001418 0.000017672 -0.000000881 0.000004898 0.000010663 -0.000001240 -0.000009073 0.000002398 0.000008571 -0.000003586 -0.000001131 0.000032480 0.000006765 0.000021771 0.000021086 -0.000000781 0.000053581 -0.000013073 -0.000000424 0.000027631 -0.000003569 -0.000027019 -0.000000233 -0.000016780 -0.000017118 0.000002412 -0.000014575 0.000004370 0.000009832 -0.000006522 -0.000000978 0.000007536 -0.000000598 -0.000013173 0.000002334 0.000004500 0.000008428 0.000000226 -0.000005005 0.000004201 0.000002693 -0.000000439 -0.000002798 -0.000006604 -0.000001342 0.000000265 0.000021230 -0.000000861 -0.000005756 0.000011439 0.000002670 -0.000001963 0.000005227 0.000004968 -0.000000038 0.000002172 -0.000009356 -0.000001542 0.000000535 -0.000005632 -0.000002225 0.000004673 -0.000001092 0.000005555 0.000003232 -0.000002164 0.000000306 -0.000001666 -0.000000022 0.000000029 -0.000001461 -0.000004157 -0.000000234 -0.000005520 -0.000002750 0.000000938 0.000001254 -0.000000897 0.000000388 0.000000475 -0.000000692 0.000000129 -0.000002007 0.000004722 0.000000454 -0.000003024 -0.000002272 -0.000001483 -0.000014806 -0.000003387 0.000003764 -0.000029408 0.000006124 0.000004511 -0.000015197 0.000000544 0.000019864 0.000002666 0.000008470 0.000011610 0.000000894 0.000017685 -0.000000257 -0.000003778 0.000009217 0.000002345 0.000003095 0.000000220 -0.000000168 0.000001259 0.000000153 -0.000010076 0.000002951 0.000000702 -0.000005471 0.000001630 0.000006761 -0.000002787 0.000005128 0.000004146 -0.000002842 0.000014112 -0.000002842 0.000001846 0.000007858 -0.000001651 -0.000017348 -0.000000323 -0.000003168 -0.000009110 -0.000001000 0.000001561 -0.000002441 -0.000002220 0.000000702 -0.000001128 -0.000000651 -0.000000391 -0.000004956 -0.000000686 0.000001133 -0.000003225 -0.000001051 0.000003425 -0.000001403 -0.000002235 -0.000057328 0.000018314 0.000013395 -0.000029133 -0.000000288 -0.000004582 0.000010872 0.000020184 0.000002348 -0.000001560 -0.000010468 -0.000000984 0.000012851 -0.000002027 -0.000005850 -0.000010311 0.000007919 0.000003445 -0.000007753 0.000002337 0.000017124 -0.000001153 -0.000009446 0.000005891 0.000001732 -0.000018159 0.000021959 -0.000007439 -0.000014792 0.000012017 0.000033047 -0.000008037 -0.000002268 0.000016347 -0.000001349 -0.000022568 0.000006677 -0.000016545 -0.000014759 0.000007472 0.000010755 0.000002302 -0.000004585 0.000004271 0.000003935 -0.000020153 0.000013626 -0.000003560 -0.000011004 0.000006139 -0.000024522 0.000008138 -0.000003449 -0.000012792 0.000003465 -0.000011216 0.000010638 -0.000000161 -0.000006097 0.000005020 -0.000016049 0.000004904 0.000004138 -0.000008182 0.000000240 0.000003556 -0.000001365 0.000003970 0.000002234 -0.000001780 -0.000010223 -0.000001937 0.000000723 -0.000005075 -0.000002498 -0.000009024 0.000004663 -0.000005556 -0.000005221 0.000003971 -0.000001769 0.000001115 0.000000251 -0.000001214 0.000000450 -0.000005101 -0.000001304 -0.000002226 -0.000002670 -0.000000648 -0.000010970 0.000007680 -0.000008957 -0.000005858 0.000005245 0.000041339 -0.000021686 0.000017292 0.000023675 -0.000014104 0.000013917 0.000001837 0.000006172 0.000007259 -0.000000153 -0.000033671 0.000013093 -0.000007866 -0.000019006 0.000007028 0.000011027 -0.000006133 -0.000003713 0.000004673 -0.000001748 -0.000000726 0.000005653 -0.000002310 -0.000001752 0.000003866 0.000008368 -0.000004014 0.000006007 0.000004448 -0.000003438 0.000010710 0.000002058 -0.000002141 0.000004579 0.000001950 -0.000001379 -0.000006237 -0.000001197 -0.000000105 -0.000003296 -0.000004774 0.000005365 -0.000003687 -0.000002775 0.000003599 -0.000004087 0.000005012 -0.000005725 -0.000002632 0.000004453 -0.000005398 -0.000001151 -0.000004120 -0.000002644 0.000000069 -0.000111400 -0.000020426 -0.000001387 -0.000092114 -0.000114466 0.000235405 -0.000165935 -0.000193122 0.000567364 0.000119115 -0.000023266 0.000094584 0.000040721 -0.000265154 -0.000045344 -0.000021293 -0.000010030 0.000006945 -0.000007284 0.000003207 -0.000003251 -0.000067763 0.000003300 0.000053699 -0.000025368 0.000033082 -0.000035404 -0.000018821 0.000084337 0.000013360 -0.000079331 0.000019272 0.000046261 -0.000090075 -0.000004019 -0.000078594 0.000060816 0.000051350 -0.000126861 0.000009638 -0.000162275 0.000073900 0.000117597 -0.000208112 0.000007581 0.000003678 -0.000005007 0.000006563 -0.000005210 0.000000355 -0.000010954 0.000027063 0.000020502 -0.000041743 0.000008013 -0.000056193 0.000020140 0.000051355 -0.000103956 -0.000001592 0.000104096 0.000463320 0.000046174 -0.000307910 0.000024100 0.000299361 0.000401547 0.000039665 -0.000310862 -0.000023799 0.000274944 0.000469288 -0.000243057 0.000004641 -0.000236126 -0.000052006 -0.000042910 -0.000014807 0.000009452 -0.000020557 -0.000019689 -0.000068267 -0.000026056 0.000130668 -0.000015205 -0.000330515 0.000349975 0.000234219 -0.000215508 0.000298099 -0.000050757 -0.000342886 -0.000016026 0.000127239 -0.000143801 -0.000681049 -0.000513209 -0.000031873 -0.000129168 -0.000059514 -0.000102554 -0.000922706 -0.000124495 0.000007706 -0.000108015 -0.000033155 -0.000077164 0.000028353 0.000064582 0.000053654 -0.000115411 -0.000276343 -0.000029502 0.000078073 -0.000128159 -0.000209566 -0.000145773 0.000064635 -0.000002498 0.000040074 0.223134657 0.152132564 0.462444285 -0.183853101 -0.057761748 0.371919150 -0.105500639 -0.014640968 0.066547333 0.575058716 -0.003525195 -0.083886844 -0.004350223 -0.002852771 0.638253775 0.074851395 0.014906429 -0.188755962 0.058722769 0.024497349 -0.000186972 -0.000230372 0.000141812 0.000089849 0.000032210 0.000294900 0.000296331 -0.000302375 -0.000206513 -0.000003189 -0.000160176 -0.000195690 0.000186872 0.000124071 0.000020136 0.000153665 0.000290652 0.000001034 -0.000086773 -0.000014663 -0.000035681 0.000003723 0.000035238 0.000042138 0.000037881 0.000290450 0.000520138 0.000218017 -0.000153967 -0.000075085 0.000096351 0.000227002 0.000038214 -0.000004729 0.000071759 -0.000069689 -0.000065907 0.000028341 0.000047178 -0.000018495 0.000232774 0.000329717 -0.000228113 -0.000277523 0.000057325 -0.000009419 0.000241794 0.000089773 -0.000035905 -0.000037842 0.000234144 0.000455290 -0.000153606 -0.000200795 -0.000053522 0.000141387 0.000231879 -0.000147229 -0.000104451 -0.000015022 -0.000125143 -0.000022255 0.000124292 0.000061806 0.000025888 -0.000057819 0.000061514 0.000099306 -0.000041245 0.000009467 -0.000021817 -0.000066364 0.000040740 -0.000020491 0.000004360 0.000038663 -0.000703103 -0.000250169 0.000135388 0.000076564 -0.000009195 -0.000489653 -0.000101455 0.000137808 0.000060939 -0.000010455 -0.000468217 -0.000144074 0.000070446 0.000051358 0.000126868 0.000248746 -0.000032288 -0.000254234 -0.000151688 0.000278131 0.000316052 -0.000252099 -0.000330787 -0.000077749 0.000057621 -0.000150111 -0.000045226 -0.000049960 0.000126896 0.000685116 0.000705160 -0.000527850 -0.000622826 -0.000246912 -0.000247185 -0.000148034 0.000238189 0.000424482 -0.000335731 -0.000007665 -0.000057615 -0.000049184 0.000100029 -0.000216331 -0.000052560 -0.000143140 0.000029331 0.000107879 0.000052228 -0.000212379 -0.000222512 0.000332943 0.000125961 0.000096776 -0.000276340 -0.000232509 0.000404366 0.000044528 0.000119424 -0.016764493 0.000440591 0.012074795 -0.241870430 0.121611654 -0.010295929 0.006641655 -0.000399519 0.126970315 -0.134078745 0.036391155 -0.010968326 -0.011542415 -0.012260451 0.006412739 0.011009271 0.002362592 0.024766082 -0.147318134 -0.038055320 0.003609225 0.001321895 0.007834127 -0.039007496 -0.069118046 -0.003521689 0.001737145 -0.035040693 -0.121926391 -0.049423167 -0.008444323 -0.022431620 0.006835369 -0.062671866 -0.048755765 -0.002742584 -0.003031654 0.002825628 -0.055852304 -0.326095131 0.015042102 0.038378648 -0.010498852 -0.007676508 -0.019299099 0.000086108 0.000117160 -0.000066684 -0.000053281 -0.000022124 0.000164710 0.000202881 -0.000126356 -0.000087584 -0.000030752 0.000018245 0.000075840 -0.000046865 0.000010674 -0.000003362 -0.000114372 -0.000142368 0.000088303 0.000053080 0.000023546 -0.000023393 0.000039836 0.000013474 0.000017887 -0.000008759 -0.000079998 -0.000133244 0.000074357 0.000030188 0.000015020 0.000026606 0.000015148 -0.000004761 -0.000011110 -0.000001761 0.000000069 0.000003778 -0.000027584 -0.000008647 -0.000001931 -0.000054911 -0.000074987 0.000058137 0.000038742 0.000006612 -0.000081650 -0.000153741 0.000101686 0.000060067 0.000014562 -0.000010440 0.000147358 -0.000068227 0.000021748 -0.000023930 0.000097004 0.000154691 -0.000086528 -0.000032472 -0.000011308 -0.000004880 -0.000049549 0.000027744 0.000012671 0.000008491 -0.000014818 -0.000039532 0.000031905 -0.000012277 0.000002547 0.000003299 -0.000006486 -0.000012027 -0.000000556 0.000011989 -0.000005286 0.000042713 -0.000028184 0.000018306 0.000003137 0.000013908 0.000042392 -0.000025933 -0.000010316 -0.000012182 -0.000012012 -0.000078045 0.000044976 -0.000007120 0.000008002 0.000080872 0.000131888 -0.000082493 -0.000037623 -0.000020322 0.000008853 0.000012809 -0.000011598 -0.000004643 -0.000001271 0.000009718 0.000005454 -0.000003853 -0.000007293 -0.000001881 0.000106179 0.000162412 -0.000094996 -0.000051064 -0.000024665 -0.000074849 -0.000133140 0.000072833 0.000036052 0.000022640 0.000054232 0.000108840 -0.000061462 -0.000024613 -0.000017188 0.000135683 -0.000237123 0.000020689 -0.000101698 0.000050165 -0.000098775 -0.000697459 0.000195078 0.000036546 0.000168200 0.000808808 0.001244657 -0.000909707 -0.000388545 -0.000149603 0.000023248 0.000000162 0.000006032 -0.000029807 -0.000016276 -0.000013222 -0.000034296 0.000008092 0.000013838 0.000012198 0.000017184 0.000008900 -0.000001163 -0.000016634 -0.000009065 0.000016172 0.000016460 -0.000001343 -0.000014197 -0.000009533 -0.000006621 -0.000016490 0.000011221 0.000001823 0.000001395 -0.000001428 0.000006449 -0.000002798 0.000001838 -0.000001752 0.000078337 0.000056306 -0.000088206 -0.000043312 0.000004515 -0.000008545 -0.000018237 0.000002456 0.000006546 0.000003634 -0.000039540 0.000007959 0.000058292 0.000015945 -0.000009497 -0.000061538 -0.000034112 0.000074018 0.000030802 -0.000000820 -0.000022883 -0.000017643 0.000024189 0.000012915 -0.000000504 -0.000063022 -0.000034313 0.000075363 0.000033395 -0.000008909 0.000088794 0.000040449 -0.000085662 -0.000061699 0.000017898 0.000021227 0.000003561 -0.000022802 -0.000007174 -0.000001287 0.000058376 0.000037220 -0.000073735 -0.000018306 -0.000002150 0.000006366 0.000014266 -0.000022638 0.000005256 -0.000007997 -0.000025896 -0.000045929 0.000017997 0.000009345 0.000009875 0.000048578 0.000016205 -0.000057813 -0.000025560 0.000006957 0.000003186 -0.000015718 0.000010204 -0.000007751 0.000009980 -0.000019872 -0.000037245 0.000019515 0.000004107 0.000011882 0.000016222 0.000012038 -0.000009972 -0.000015125 0.000006287 -0.000010475 -0.000009470 0.000012216 0.000004761 0.000001985 0.000006249 0.000017519 0.000003754 -0.000006825 -0.000004574 0.000003984 -0.000002676 -0.000004816 -0.000002958 0.000002318 -0.000013222 -0.000017407 0.000008414 0.000010765 0.000000547 -0.000010698 0.000044858 0.000033293 -0.000000838 -0.000013478 -0.000005781 0.000006681 0.000007262 0.000002121 -0.000003388 -0.000519668 -0.000383662 0.000540507 0.000314164 -0.000048999 -0.000042330 0.000056295 0.000065668 0.000040024 -0.000059311 0.000290847 -0.000024122 -0.000513642 -0.000110698 0.000006707 -0.000050461 -0.000049173 0.000053468 0.000024265 0.000001096 0.000059461 0.000073774 -0.000060387 -0.000023168 -0.000013177 -0.000021283 -0.000039555 0.000013156 0.000004430 0.000009662 0.000014702 0.000012482 -0.000022246 -0.000005130 -0.000001012 0.000045105 0.000058721 -0.000045605 -0.000021175 -0.000008963 -0.000023652 -0.000026120 0.000020819 0.000012347 0.000002675 0.000067020 0.000315434 -0.000166950 -0.000005455 -0.000032649 0.000152027 0.000344203 -0.000151583 -0.000078689 -0.000090301 -0.000486373 -0.000796988 0.000585937 0.000220415 0.000089517 -0.000250843 -0.000025978 0.000141193 0.000157484 -0.000009549 0.000029238 0.000297128 -0.000006333 -0.000008875 -0.000096400 -0.000422780 -0.000592370 0.000455373 0.000212193 0.000079430 0.000164753 0.000172175 -0.000126950 -0.000106944 0.000014278 0.000000973 -0.000035031 0.000003240 -0.000024731 0.000050214 -0.000101399 0.000028046 0.000216439 0.000031345 0.000007242 0.000298607 0.000218808 -0.000335185 -0.000177103 0.000011030 0.000076720 -0.000080851 -0.000141856 -0.000037572 0.000054529 -0.000240985 -0.000014922 0.000377816 0.000108642 -0.000018984 0.000000360 -0.000004588 -0.000001002 0.000000007 0.000002120 -0.000000157 0.000007205 0.000001371 0.000000480 -0.000002926 0.000016963 0.000018638 -0.000009687 -0.000010717 -0.000004073 0.000018109 0.000038797 -0.000012728 -0.000008992 -0.000008856 -0.000023317 -0.000015185 0.000020575 0.000015262 0.000000425 -0.000014959 -0.000030896 0.000007222 0.000007602 0.000007770 0.000024472 0.000029866 -0.000016364 -0.000014689 -0.000005815 -0.000031408 -0.000042843 0.000022236 0.000018280 0.000009117 -0.000018235 -0.000024870 0.000016465 0.000009943 0.000004319 -0.000010290 -0.000015350 0.000007998 0.000005633 0.000002884 -0.000024474 -0.000027338 0.000018960 0.000014581 0.000004457 0.000003477 0.000003407 0.000000252 -0.000002803 -0.000000756 0.000011070 0.000013511 -0.000010670 -0.000006009 -0.000001907 0.000009184 0.000014870 -0.000006135 -0.000005095 -0.000003525 0.000003238 0.000005828 -0.000005000 -0.000001227 -0.000000843 -0.000007199 -0.000011216 0.000002985 0.000004345 0.000002767 0.000001091 0.000002009 -0.000001589 -0.000000432 -0.000000238 0.000012420 0.000018422 -0.000010323 -0.000006703 -0.000003740 -0.000027277 -0.000040217 0.000020521 0.000015147 0.000008265 0.000024124 0.000025249 -0.000019316 -0.000014312 -0.000003527 -0.000000084 0.000005475 0.000004431 -0.000000195 -0.000002506 -0.000018846 -0.000021116 0.000015016 0.000011234 0.000003582 -0.000001784 -0.000000899 -0.000000071 0.000001236 0.000000528 0.000003446 0.000000755 0.000000314 -0.000003058 -0.000000210 0.000008283 0.000014254 -0.000006569 -0.000004188 -0.000003082 -0.000003001 0.000000802 0.000001827 0.000002149 -0.000000902 0.000006809 0.000004459 -0.000008409 -0.000003553 0.000000277 -0.000002604 -0.000002778 0.000000550 0.000001721 0.000000406 -0.000009207 -0.000013156 0.000005644 0.000005232 0.000002675 0.000010610 0.000014333 -0.000009214 -0.000005727 -0.000002550 0.000054745 0.000060762 -0.000047226 -0.000032323 -0.000008812 0.000036748 0.000056094 -0.000033350 -0.000020023 -0.000010481 0.000032232 0.000045585 -0.000028508 -0.000017582 -0.000008445 0.000008598 0.000007886 -0.000007348 -0.000006011 -0.000000920 -0.000026090 -0.000032446 0.000023141 0.000013847 0.000004472 -0.000009374 -0.000021808 0.000006629 0.000004169 0.000005619 -0.000022146 -0.000022359 0.000019236 0.000012931 0.000002654 -0.000020578 -0.000038073 0.000015919 0.000010842 0.000008754 -0.000018638 -0.000025028 0.000018186 0.000009642 0.000003871 0.000002097 -0.000002855 -0.000002805 -0.000001641 0.000001518 0.000003869 -0.000001841 -0.000005116 -0.000002891 0.000001731 0.000001476 -0.000001716 0.000000018 -0.000001765 0.000000567 0.000016053 0.000018047 -0.000013229 -0.000009606 -0.000002854 0.000006793 0.000011007 -0.000004801 -0.000003686 -0.000002456 0.000010840 0.000013285 -0.000011213 -0.000005540 -0.000001690 -0.000008930 -0.000016546 0.000007475 0.000004468 0.000003771 0.000000866 0.000000107 0.000000027 -0.000000786 -0.000000035 -0.000000529 -0.000002309 -0.000001151 0.000000521 0.000000976 -0.000012219 -0.000020536 0.000009138 0.000007061 0.000004716 0.000016158 0.000036218 -0.000012079 -0.000007781 -0.000009098 0.000002805 0.000007805 -0.000000043 -0.000001634 -0.000002294 -0.000001784 -0.000014356 -0.000000192 -0.000000292 0.000004704 -0.000010800 -0.000013190 0.000010241 0.000005901 0.000001564 -0.000006375 -0.000010496 0.000007594 0.000002705 0.000001720 0.000008542 0.000014711 -0.000006024 -0.000004715 -0.000003406 -0.000010125 -0.000011556 0.000009697 0.000005591 0.000001496 0.000000894 0.000001135 -0.000002430 -0.000000069 -0.000000055 -0.000005914 -0.000009836 0.000005066 0.000003085 0.000002071 -0.000011648 -0.000018460 0.000009739 0.000006254 0.000003931 -0.000004420 -0.000007781 0.000001950 0.000002746 0.000002011 0.000553515 0.005470727 0.001585772 -0.000905551 0.000320594 -0.001470752 -0.005702992 0.001321615 0.000514785 0.000079757 0.000781180 -0.002791383 -0.000514713 -0.000005025 -0.000512386 -0.001008137 -0.000527098 0.000929427 0.000067866 -0.000030980 -0.000142765 0.002094866 0.001647790 0.000425095 0.000562025 0.000693170 0.000400439 -0.001283473 0.000139528 0.000406070 0.000132972 0.001156860 -0.000994502 -0.000273450 -0.000120551 -0.000167694 0.001164633 -0.000132454 -0.000058404 0.000008140 0.001250822 0.002114777 -0.000054789 -0.000349829 -0.000042536 0.000168366 0.000142656 -0.000077244 0.000035176 0.000011471 -0.000086688 0.000340845 0.001265940 0.000155346 0.000287339 0.000074452 -0.000765287 -0.000311937 -0.000106126 -0.000100732 0.003226802 0.003375590 0.003641310 0.000570678 -0.001368374 0.001338402 0.002418634 -0.003012440 -0.000274942 0.000369683 0.004761403 0.001284351 -0.003396060 0.000551641 0.000380673 -0.000802778 -0.000361205 -0.000044642 -0.000134338 0.000059441 -0.001806134 -0.001774150 0.000570081 0.000003517 0.000216819 0.000951657 0.000967165 -0.000507613 -0.000134202 -0.000073873 0.000054855 0.000098844 0.000032795 0.000117684 0.000018928 0.000189912 0.000219541 0.000115037 0.000080773 0.000041602 -0.000391403 -0.000126190 0.000283982 -0.000031249 -0.000010702 -0.000146572 -0.001019825 0.000622977 0.000364700 -0.000005562 -0.000506360 0.000200805 0.001772889 0.000061760 -0.000363873 0.000112427 -0.000140830 -0.000343244 0.000026463 0.000117215 0.516516448 -0.000108819 0.165807968 0.000179818 0.053416748 0.066062079 -0.000125862 -0.143160706 -0.057898875 0.201043585 0.000075784 -0.010576102 0.015128391 0.000609000 0.151746032 -0.000085898 -0.006780866 0.007979906 0.001713289 -0.138825091 0.000194497 0.012545211 -0.018647721 -0.002892751 -0.032125182 -0.000124316 -0.009792570 -0.012846189 -0.009348811 0.013105729 0.000027632 -0.002377349 -0.005256223 -0.003408865 -0.015685174 0.000104365 0.012466474 0.018560773 0.010174435 -0.002891442 0.000059012 -0.000273926 0.000042248 -0.000471240 0.000127149 0.000196188 -0.000186533 0.000205369 -0.000308584 0.000169419 0.000117305 -0.000160231 0.000052639 -0.000331403 0.000115302 -0.000104372 0.000193923 -0.000033072 0.000190531 0.000136979 -0.000058796 0.000312511 -0.000138566 0.000361646 -0.000186714 -0.000052041 0.000195675 -0.000029237 0.000281174 -0.000100851 -0.000147619 0.000030803 -0.000005183 0.000005710 -0.000279145 -0.000128077 0.000011805 -0.000053655 0.000053220 -0.000306895 -0.000101088 0.000062656 -0.000140297 -0.000075423 -0.000371250 0.000025197 -0.000007155 -0.000124547 -0.000048653 0.000226727 0.000203937 -0.000093561 0.000010811 -0.000145141 0.000006472 -0.000066736 -0.000043530 0.000335982 0.000173034 -0.000169901 0.000340251 -0.000115787 0.000238017 -0.000150162 -0.000055341 -0.000258578 0.000081240 0.000069784 -0.000005148 -0.000110647 -0.000067313 0.000182056 -0.000272334 0.000366660 0.000016327 0.000025845 0.000699995 -0.000127820 0.001005585 -0.000169083 -0.000254732 0.000132846 0.000219015 0.000176965 -0.000137981 -0.000396435 -0.000767226 0.000246981 -0.000916918 0.000056731 -0.006942987 -0.000041154 0.000058670 -0.000051861 0.000017076 0.002433493 -0.000019276 0.000023209 -0.000029979 0.000004462 -0.050970129 -0.000019117 -0.000036761 -0.000028944 -0.000021939 -0.132052081 0.000014810 0.000019834 0.000024126 0.000007888 -0.055052231 -0.000015703 0.000002439 -0.000034480 -0.000016048 -0.214993671 0.000007385 -0.000025296 0.000013695 0.000004948 -0.005130066 -0.000011810 0.000029320 -0.000019075 0.000012726 -0.006333721 -0.000002229 0.000001343 0.000005273 0.000005789 -0.048930462 0.000010607 -0.000015501 0.000015563 0.000002942 0.000043846 -0.000007810 0.000020335 0.000001426 0.000014950 0.000088999 -0.000007625 0.000032488 0.000008001 0.000025425 0.000036511 0.000002793 -0.000011839 -0.000005730 -0.000011053 -0.000065673 0.000005660 -0.000015737 0.000000067 -0.000010401 -0.000010474 0.000003010 -0.000016432 -0.000005516 -0.000013404 -0.000054794 0.000002706 -0.000003436 0.000002694 -0.000001157 0.000011781 -0.000000796 0.000003719 0.000001772 0.000003385 0.000015697 -0.000000144 0.000005845 0.000001551 0.000003830 -0.000031314 0.000003293 -0.000013712 -0.000003602 -0.000010602 -0.000063159 0.000003390 -0.000016729 -0.000004996 -0.000013267 0.000033657 0.000004119 -0.000021201 -0.000010065 -0.000018688 0.000064143 -0.000001514 0.000011975 0.000003108 0.000008990 -0.000020825 0.000001920 0.000001229 0.000003870 0.000002477 -0.000025694 -0.000001796 0.000007409 0.000004728 0.000007201 0.000010306 -0.000000522 0.000000842 0.000000098 0.000001241 0.000021759 0.000004713 -0.000009389 -0.000000678 -0.000006835 0.000015825 -0.000000308 -0.000002253 -0.000003088 -0.000003122 -0.000037730 -0.000002655 0.000010537 0.000005213 0.000009816 0.000058335 -0.000003707 0.000009334 -0.000001591 0.000005153 0.000008463 0.000000174 0.000003282 0.000001880 0.000003089 0.000002520 -0.000000859 0.000003138 0.000000788 0.000002419 0.000070453 -0.000004209 0.000010346 -0.000001272 0.000005908 -0.000051608 0.000002656 -0.000006988 0.000001199 -0.000003839 0.000042622 -0.000001398 0.000004582 -0.000000529 0.000002380 0.000022453 -0.000016486 0.000052914 0.000012473 0.000040029 -0.000092937 -0.000001432 0.000041765 0.000027215 0.000040807 0.000764683 -0.000021212 0.000051838 -0.000023155 0.000021728 -0.000007403 -0.000004419 0.000007194 -0.000000852 0.000004167 -0.000008126 0.000001251 -0.000000429 0.000001354 0.000000407 0.000000170 -0.000002732 0.000003956 -0.000001149 0.000002177 0.000002072 -0.000003288 0.000002884 -0.000002380 0.000000916 -0.000008738 0.000000356 0.000001627 0.000001975 0.000002053 0.000002896 -0.000000921 -0.000003651 -0.000003799 -0.000004086 0.000036185 -0.000038972 0.000161904 0.000047361 0.000149178 -0.000004390 0.000016104 -0.000001533 0.000001267 -0.000014168 -0.000013154 0.000026989 -0.000060187 -0.000029858 -0.000086716 -0.000030067 -0.000002766 -0.000053321 -0.000022007 -0.000050481 -0.000009586 -0.000014670 -0.000044347 -0.000041624 -0.000037137 -0.000023484 0.000065608 -0.000189936 -0.000101360 -0.000213244 0.000024812 -0.000030365 0.000257055 -0.000170118 0.000315896 0.000011928 0.000250249 0.000015158 -0.000123914 -0.000357219 0.000028527 -0.000146172 0.000015358 -0.000038842 0.000044927 0.000015937 0.000013989 -0.000045894 -0.000027976 -0.000042364 -0.000016398 0.000020357 -0.000002457 0.000043619 0.000044528 0.000016174 -0.000058803 0.000088318 0.000118391 0.000214343 -0.000012568 -0.000098215 0.000060126 -0.000000196 0.000128002 -0.000017188 0.000015823 0.000078759 0.000008439 0.000060092 0.000001079 -0.000045049 0.000089239 0.000001816 0.000082267 -0.000007807 -0.000009603 0.000019471 0.000008824 0.000022398 0.000001678 -0.000003770 0.000008959 -0.000001179 0.000007517 0.000000770 -0.000002690 0.000013141 0.000005315 0.000013616 -0.000005175 0.000025493 -0.000034213 -0.000004300 -0.000051734 0.000001968 0.000005858 -0.000016566 -0.000017103 -0.000034381 0.000002991 0.000022247 -0.000027340 -0.000013076 -0.000047428 -0.000190625 0.000983340 -0.001355108 -0.000054880 -0.002315152 0.000036904 0.000077338 -0.001610062 -0.000451846 -0.001504766 0.000203437 0.001848156 -0.002750743 -0.000194367 0.001288722 -0.000023258 0.000058981 -0.000136669 0.000027226 -0.000060177 0.000036140 -0.000063876 -0.000060484 0.000015418 0.000030175 -0.000013114 0.000068611 0.000137226 0.000045836 0.000027583 0.000009407 -0.000010209 0.000019829 0.000010899 0.000024814 0.000026179 -0.000011116 0.000017383 -0.000003189 0.000013188 -0.000010562 0.000007281 -0.000014293 0.000002962 -0.000011670 0.000134837 0.000006658 -0.000017358 -0.000006233 -0.000014025 0.000109617 -0.000005490 -0.000002400 -0.000012461 -0.000008355 -0.000488609 0.000010811 -0.000025570 0.000016417 -0.000007613 -0.000160575 0.000016332 -0.000045641 -0.000003770 -0.000031042 -0.000019695 -0.000000279 -0.000023211 -0.000011950 -0.000020999 -0.000377611 0.000013886 -0.000040154 0.000006676 -0.000021910 0.000043785 -0.000787478 0.000898794 -0.000008341 0.000205114 -0.000050293 -0.001065949 0.000785868 0.000605136 0.000721238 -0.000097751 -0.000910111 0.001316146 0.000138102 -0.000180798 0.000142997 0.000152974 -0.000225583 0.000055068 0.000658133 -0.000002827 0.000070097 0.000184953 -0.000058287 0.001215880 -0.000140390 -0.000726239 0.001032918 -0.000188989 -0.000969427 0.000000226 0.000001190 0.000001258 0.000002199 0.000001546 0.000000393 0.000000139 -0.000004990 -0.000002894 -0.000005136 0.000006869 -0.000002348 0.000003377 -0.000000993 0.000002058 0.000011145 -0.000003995 -0.000003640 -0.000007125 -0.000005918 -0.000010135 0.000003648 -0.000020497 -0.000006865 -0.000019137 -0.000007440 0.000002665 0.000006683 0.000006656 0.000008317 0.000010955 -0.000003253 0.000006280 -0.000000508 0.000004497 -0.000016061 0.000003170 -0.000004134 0.000001982 -0.000001629 -0.000011292 0.000001681 -0.000003958 0.000000288 -0.000002632 -0.000005694 0.000001800 -0.000001777 0.000001132 -0.000000898 -0.000012562 0.000002394 -0.000007136 -0.000000751 -0.000005421 -0.000000292 -0.000001550 0.000001970 -0.000000673 0.000001515 0.000007185 -0.000000536 0.000002899 0.000000704 0.000002186 0.000005071 -0.000000820 -0.000000967 -0.000001720 -0.000001766 0.000003538 0.000000014 0.000000294 -0.000000006 0.000000055 -0.000002840 0.000000955 0.000001078 0.000001769 0.000001753 0.000001249 -0.000000014 -0.000000322 -0.000000270 -0.000000486 0.000007666 -0.000000921 0.000000470 -0.000001075 -0.000000509 -0.000015070 0.000003448 -0.000002309 0.000003113 0.000000097 0.000011443 -0.000003172 0.000011177 0.000002453 0.000009750 -0.000001294 -0.000000808 -0.000005018 -0.000003660 -0.000005466 -0.000009803 0.000001712 -0.000005927 -0.000000966 -0.000004741 0.000000116 0.000000200 -0.000000358 -0.000000357 -0.000000568 -0.000000565 -0.000000673 0.000002452 0.000000717 0.000002528 0.000005382 -0.000000743 -0.000001715 -0.000001968 -0.000002526 -0.000000289 0.000000453 -0.000003989 -0.000001946 -0.000004154 0.000004321 -0.000000407 0.000005782 0.000002860 0.000005591 -0.000000330 0.000000792 -0.000000891 0.000000306 -0.000000652 -0.000004437 0.000001016 -0.000000144 0.000001216 0.000000660 0.000006454 -0.000000903 0.000001599 -0.000000357 0.000000738 0.000029143 -0.000006691 0.000025708 0.000005508 0.000021886 0.000022401 -0.000006518 0.000010131 -0.000002688 0.000007532 0.000019614 -0.000003922 0.000005146 -0.000002561 0.000002580 0.000003693 -0.000001985 0.000006932 0.000001618 0.000007178 -0.000014184 0.000004835 -0.000008951 -0.000000088 -0.000006932 -0.000008071 -0.000002291 0.000014365 0.000008894 0.000017850 -0.000010972 0.000002820 -0.000012219 -0.000003508 -0.000011095 -0.000013581 0.000002169 0.000005926 0.000007061 0.000008574 -0.000012039 0.000002022 -0.000004278 0.000000203 -0.000003087 -0.000000195 -0.000001173 0.000010265 0.000005043 0.000010769 0.000001138 -0.000001075 0.000009680 0.000004197 0.000009773 -0.000001302 -0.000001097 0.000006190 0.000002589 0.000006318 0.000008150 -0.000002148 0.000007122 0.000001262 0.000006057 0.000003984 -0.000000580 -0.000001016 -0.000001402 -0.000001591 0.000007303 -0.000000831 0.000003305 0.000000660 0.000002695 -0.000006436 0.000000493 0.000003138 0.000002696 0.000003822 -0.000000085 -0.000000100 0.000000625 0.000000274 0.000000548 0.000000342 0.000000169 0.000001363 0.000000968 0.000001530 -0.000007698 0.000001113 0.000004115 0.000004304 0.000005409 0.000012959 -0.000000367 -0.000016004 -0.000011045 -0.000018953 0.000001387 -0.000000668 -0.000003062 -0.000002491 -0.000003833 -0.000003500 -0.000000927 0.000013289 0.000007035 0.000014241 -0.000005743 0.000002562 -0.000006747 -0.000001010 -0.000006133 -0.000005440 0.000000739 0.000000293 0.000001131 0.000000601 0.000005384 -0.000000577 -0.000003008 -0.000002744 -0.000003909 -0.000005905 0.000001312 -0.000003358 -0.000000072 -0.000002628 0.000001726 0.000000452 -0.000000943 -0.000000197 -0.000000822 -0.000004211 0.000000308 0.000002333 0.000002052 0.000002981 -0.000007707 0.000000724 0.000001734 0.000002356 0.000002685 -0.000001991 0.000000604 0.000001100 0.000001408 0.000001639 0.000257541 0.000035715 0.000024415 0.000036884 0.000012786 -0.000410433 -0.000113310 0.000108986 -0.000090785 0.000020654 -0.000157466 0.000117582 -0.000029011 0.000080223 -0.000034919 0.000179618 -0.000024917 -0.000016456 -0.000016811 0.000004736 -0.000189447 -0.000030843 0.000057046 -0.000032456 0.000020481 -0.000506273 -0.000035030 0.000003356 -0.000034029 0.000007517 0.000231465 0.000002615 -0.000043756 -0.000011691 -0.000006232 0.000156457 -0.000004441 -0.000092518 0.000001198 0.000002743 0.000147648 -0.000018217 -0.000088576 0.000005059 0.000028968 -0.000069504 -0.000002630 0.000001114 -0.000002357 0.000007534 -0.000284173 0.000013208 -0.000017729 0.000009279 -0.000011040 0.000106924 0.000000377 -0.000016163 0.000005149 0.000003245 0.001350097 -0.001590573 0.000416459 0.001530671 -0.000409710 0.000011115 0.001032513 -0.000556495 -0.000543059 -0.000125605 0.001088528 0.000439283 0.000602009 -0.000407226 0.000463585 -0.000198794 -0.001020133 0.000824660 0.001077809 -0.000221861 -0.000593324 0.001060825 -0.000096195 -0.000775698 0.000086243 0.000331770 0.000931147 -0.001242207 0.000266393 -0.000325938 0.000040720 -0.000512590 0.000184070 -0.000457244 0.000246076 0.000016848 0.000174713 -0.000015388 0.000126148 0.000059156 -0.000131815 -0.000047343 -0.000005703 -0.000415061 0.000133871 -0.000173610 -0.000061034 -0.000173529 0.000090749 -0.000068579 0.000105552 -0.000017335 0.000306346 -0.000371341 0.000231805 0.000035150 -0.000051119 -0.000164849 -0.000009481 -0.000036958 0.224543556 0.038499368 0.048431496 0.014700036 0.007607747 0.134842852 -0.014963458 -0.007827577 0.125969164 0.208121545 -0.001856937 -0.002727618 0.056312077 0.078206256 0.075077009 -0.000019190 0.000149968 0.000276643 -0.000063837 0.000033518 0.000021655 0.000167536 0.000123604 -0.000063832 0.000076139 -0.000074811 0.000173815 0.000201169 -0.000048828 -0.000047523 0.000047203 0.000237487 -0.000478758 0.000374463 -0.001036805 0.000026135 -0.000045897 -0.000686505 0.000418998 -0.000901118 0.000025828 -0.000075740 -0.000263225 0.000214809 -0.000234880 -0.000051093 -0.000484134 0.000146172 -0.000076549 0.000419451 0.000096715 -0.000362373 0.000014048 0.000002221 0.000267438 -0.000082882 -0.000280218 0.000097752 0.000030495 0.000216699 -0.000075729 0.000262829 -0.000036531 0.000021709 -0.000227833 0.000085695 0.000182304 -0.000021504 -0.000002621 0.000009023 0.000350901 -0.000766386 0.000217080 -0.000053544 0.000273286 0.000044172 -0.000016980 0.000281086 -0.000087030 0.000547725 -0.000150868 0.000078214 -0.000011021 0.000058566 0.000343263 0.000096246 -0.000042972 -0.000151399 0.000036720 -0.000636678 0.000049362 -0.000332173 -0.000039464 0.000145823 0.000018281 0.000118766 -0.000264186 0.000028138 0.000012890 0.000258782 -0.000123913 0.000400178 0.000048612 -0.000159651 0.000331018 0.000004209 0.000007107 0.000036004 -0.000051816 0.000101750 -0.000003048 0.000002430 0.000011775 0.000007783 0.000028596 -0.000024334 -0.000006949 -0.000038096 0.000012605 -0.000073338 0.000013723 -0.000017123 0.000007031 -0.000012053 0.000031906 -0.000003273 -0.000030398 -0.000003880 0.000001011 -0.000008594 0.000004760 0.000008484 0.000010475 0.000002294 -0.000020809 0.000000113 0.000011660 0.000014884 -0.000012913 0.000050473 -0.000005148 0.000015794 -0.000022545 0.000013133 -0.000029630 0.000003979 0.000005293 0.000002934 0.000001106 -0.000010988 0.000004996 0.000002668 -0.000011171 0.000000270 -0.000002583 0.000007420 0.000007177 -0.000024298 0.000001128 -0.000009713 -0.000005969 0.000000172 0.000004948 0.000002032 0.000001760 -0.000001474 -0.000004343 0.000012001 -0.000002072 0.000003827 -0.000005344 -0.000001991 0.000010420 0.000001296 0.000004490 0.000001766 -0.000002885 0.000004839 -0.000002787 0.000002018 0.000001044 0.000001431 -0.000003079 -0.000000218 -0.000001560 0.000001305 0.000000332 -0.000004245 -0.000000596 -0.000000803 -0.000002144 -0.000004720 0.000012761 -0.000001680 0.000006583 -0.000003467 -0.000004517 0.000014675 -0.000000856 0.000006715 -0.000008898 -0.000001826 0.000012313 0.000001617 0.000005821 0.000001848 0.000003912 -0.000010992 0.000001180 -0.000005165 0.000001975 -0.000000506 -0.000001337 -0.000001093 -0.000002012 0.000003817 0.000000419 -0.000004131 -0.000000735 -0.000002021 -0.000000087 0.000001126 -0.000002301 0.000000639 -0.000002316 -0.000003003 -0.000000343 0.000003416 0.000000041 0.000000049 -0.000003229 0.000002161 -0.000000732 0.000001841 -0.000000853 0.000004821 0.000000757 -0.000005798 -0.000000773 -0.000003591 -0.000000156 0.000002666 -0.000007322 0.000001933 -0.000001775 0.000001342 0.000000494 -0.000002501 -0.000000641 -0.000001088 0.000000856 0.000000513 -0.000001993 -0.000000013 -0.000000604 -0.000000705 0.000004376 -0.000009771 0.000003095 -0.000003288 0.000000515 -0.000002637 0.000006241 -0.000001818 0.000001662 -0.000000468 0.000001917 -0.000004277 0.000001033 -0.000000846 0.000011364 0.000012650 -0.000039161 0.000004152 -0.000018355 0.000019041 0.000005810 -0.000033615 -0.000004260 -0.000024149 -0.000017070 0.000031037 -0.000059436 0.000020274 -0.000016734 0.000000418 0.000001990 -0.000004177 0.000001549 -0.000000539 0.000000160 0.000000516 -0.000001243 -0.000000049 -0.000002248 -0.000000009 0.000001435 -0.000001972 0.000000784 0.000000263 0.000000251 -0.000000294 0.000000607 0.000000396 0.000002591 0.000001377 -0.000000243 -0.000000710 -0.000000780 -0.000000681 -0.000002176 -0.000000201 0.000002909 0.000000998 0.000001926 0.000082389 -0.000043520 -0.000023348 -0.000053199 0.000012288 -0.000015360 -0.000007270 -0.000008297 0.000008397 -0.000005136 -0.000034925 0.000003535 0.000014532 0.000022859 0.000018866 0.000001897 -0.000015786 0.000035730 0.000008433 0.000007225 -0.000030708 0.000026362 0.000017955 0.000011673 -0.000005000 -0.000103582 0.000059615 0.000030538 0.000078093 -0.000018451 0.000235657 -0.000081825 0.000032450 -0.000058265 -0.000078696 0.000122607 0.000094078 -0.000049851 0.000164431 -0.000090379 -0.000123678 -0.000216461 -0.000002705 0.000017721 -0.000036161 -0.000000762 0.000004839 0.000012966 0.000017669 -0.000012192 0.000025546 -0.000004961 -0.000012940 -0.000017464 -0.000005383 0.000123694 -0.000026451 -0.000004877 -0.000071758 -0.000002269 0.000082864 -0.000012509 0.000024378 -0.000043181 -0.000003466 0.000020921 -0.000006089 -0.000011281 -0.000029820 0.000015921 0.000042636 -0.000027188 -0.000004671 -0.000034467 0.000014259 0.000016821 -0.000010936 0.000003450 -0.000011279 0.000007537 0.000008325 -0.000005183 0.000004946 -0.000004943 0.000010157 0.000006972 -0.000000534 -0.000003361 -0.000005112 -0.000000386 -0.000045409 0.000006072 -0.000008898 0.000020572 -0.000010111 -0.000009542 -0.000007376 0.000020593 0.000002941 0.000030628 -0.000044550 0.000007735 -0.000001597 0.000016694 0.000003566 -0.002200826 0.000496936 -0.000321263 0.000863081 -0.000012583 -0.001816628 0.001018992 0.000165461 0.000356581 -0.000169592 0.001587852 0.003580026 0.000607167 -0.000270069 -0.001120634 -0.000046268 0.000025468 0.000006021 0.000021797 -0.000009863 0.000023286 -0.000015759 0.000013715 0.000002457 -0.000015543 0.000022679 -0.000000589 -0.000031062 -0.000035648 0.000036080 0.000016293 -0.000003513 -0.000001484 -0.000009510 0.000001861 0.000006518 -0.000002324 -0.000001955 -0.000000966 -0.000000154 -0.000004945 0.000001980 0.000002522 0.000001556 0.000001637 -0.000006462 -0.000001771 0.000009057 -0.000000396 0.000004609 -0.000007902 0.000002828 0.000002189 0.000004733 0.000007073 0.000012490 -0.000017421 0.000032098 -0.000012075 0.000007600 -0.000003782 -0.000015506 0.000038728 -0.000008032 0.000016456 -0.000007787 -0.000004958 0.000021913 0.000001514 0.000014275 0.000004736 -0.000018272 0.000039650 -0.000010115 0.000012552 0.000090189 -0.000802493 -0.000042713 -0.000123974 0.000151732 -0.000828160 -0.000630437 -0.000178386 -0.000389336 0.000403316 -0.000206142 -0.001819001 -0.000231844 0.000035724 0.000464758 0.000834539 0.000789126 0.000275278 -0.000395325 -0.000178673 -0.000183217 0.000018047 0.000401302 -0.000555759 -0.000360552 -0.000535344 -0.001799784 -0.000208762 0.000309401 0.000420106 0.000000549 0.000000623 -0.000002101 -0.000000229 -0.000001800 -0.000002719 0.000000007 0.000002670 0.000001486 0.000001502 0.000000661 0.000000338 -0.000001405 0.000000484 0.000000086 -0.000003091 -0.000000870 0.000004235 0.000002646 0.000004028 -0.000009835 0.000000263 0.000008000 0.000005468 0.000002001 0.000004600 0.000000044 -0.000003931 -0.000003869 -0.000002730 0.000001717 0.000000149 -0.000002415 0.000000030 -0.000000004 0.000000108 -0.000000693 0.000001806 -0.000001140 -0.000000655 -0.000000786 -0.000000450 0.000001910 -0.000000009 0.000000057 -0.000000356 0.000000073 0.000000113 -0.000000226 -0.000000721 -0.000002007 -0.000000681 0.000003785 0.000000251 0.000000927 0.000000945 -0.000000530 -0.000000010 -0.000000149 0.000000335 0.000000688 0.000000509 -0.000001924 -0.000000132 -0.000000602 -0.000001266 0.000000288 0.000000441 0.000001066 0.000000667 -0.000000115 0.000000240 -0.000000282 -0.000000004 0.000000070 0.000001166 -0.000000046 -0.000000535 -0.000001171 -0.000000482 -0.000000330 0.000000084 0.000000009 0.000000242 0.000000048 -0.000000758 0.000000488 -0.000000463 0.000000800 0.000000354 0.000000734 -0.000000369 0.000000377 -0.000001455 -0.000001479 0.000004653 0.000000151 -0.000004665 -0.000001900 -0.000001053 -0.000002650 -0.000000452 0.000003040 0.000001967 0.000001720 -0.000001800 -0.000000640 0.000003061 0.000000527 0.000000706 -0.000000189 -0.000000239 0.000000242 0.000000065 0.000000122 0.000001231 -0.000000018 -0.000001192 -0.000000387 -0.000000669 -0.000001679 0.000000357 0.000000632 0.000001338 0.000000656 -0.000002195 -0.000000063 0.000001907 0.000001110 0.000000931 0.000002700 0.000000373 -0.000002716 -0.000001747 -0.000000895 -0.000000410 0.000000220 0.000000141 -0.000000101 -0.000000001 0.000000605 -0.000000139 0.000000095 -0.000000867 -0.000000271 0.000000039 0.000000387 -0.000000863 0.000000284 0.000000116 0.000010156 0.000000106 -0.000009904 -0.000005033 -0.000000865 0.000002965 -0.000001045 -0.000001233 -0.000001252 0.000002433 0.000000063 0.000000735 -0.000001992 0.000000838 0.000000573 0.000003484 -0.000000467 -0.000002027 -0.000002139 0.000000026 -0.000003526 0.000000119 0.000002692 0.000000758 0.000000019 0.000009694 -0.000003093 -0.000002717 -0.000007318 -0.000000357 -0.000005194 0.000000087 0.000004974 0.000002650 0.000001117 0.000005316 -0.000000804 -0.000002566 -0.000004108 -0.000002238 -0.000000833 -0.000000609 0.000001988 0.000000100 0.000000201 0.000006004 -0.000001284 -0.000002807 -0.000004115 -0.000000345 0.000005118 -0.000000653 -0.000003407 -0.000003376 -0.000000992 0.000003590 -0.000001084 -0.000001469 -0.000002269 0.000000016 0.000002876 -0.000000050 -0.000002709 -0.000001264 -0.000000276 -0.000001115 0.000000284 0.000000294 0.000000965 0.000000385 0.000000973 0.000000546 -0.000001824 -0.000000387 -0.000000548 0.000002544 -0.000000668 -0.000000916 -0.000001825 -0.000000654 0.000000274 -0.000000056 -0.000000306 -0.000000090 -0.000000061 0.000000755 0.000000196 -0.000000728 -0.000000628 -0.000000425 0.000003412 -0.000000927 -0.000000985 -0.000002849 -0.000000628 -0.000010860 0.000002505 0.000004900 0.000007870 0.000002228 -0.000001851 -0.000000313 0.000001702 0.000001513 0.000001169 0.000007851 -0.000001115 -0.000004578 -0.000005258 -0.000001581 -0.000003193 0.000000655 0.000001627 0.000001649 -0.000000091 0.000000748 -0.000000629 -0.000000032 -0.000000461 -0.000000086 -0.000002501 0.000000583 0.000000761 0.000001991 0.000000561 -0.000001096 -0.000000511 0.000001635 0.000000255 0.000000486 -0.000000815 0.000000798 -0.000000177 0.000000276 -0.000000311 0.000001914 -0.000000755 -0.000000396 -0.000001486 -0.000000196 0.000002031 -0.000000848 -0.000000131 -0.000001626 -0.000000375 0.000000930 0.000000131 -0.000000548 -0.000000918 -0.000000518 -0.000014826 0.000025723 -0.000080427 0.000016440 0.000001671 0.000037994 -0.000099567 0.000104817 -0.000036752 0.000061428 -0.000025606 0.000028098 -0.000085898 0.000018240 0.000028622 0.000003223 0.000005294 0.000018671 0.000008873 -0.000022681 0.000005860 -0.000013516 -0.000002588 -0.000002815 0.000018316 0.000006129 -0.000009424 0.000026036 0.000000728 -0.000001661 -0.000006618 0.000020733 -0.000003898 -0.000000903 -0.000039676 0.000001511 0.000058926 0.000048070 0.000039553 -0.000039600 0.000017511 0.000089059 0.000120377 0.000004620 -0.000052387 0.000008035 0.000002414 0.000029235 -0.000010828 -0.000003489 -0.000007363 0.000007431 -0.000012304 0.000001719 0.000000890 0.000001939 0.000020418 0.000015551 -0.000004248 -0.000018131 -0.000227244 0.000241478 -0.000162713 -0.000051386 -0.000098887 -0.000003585 -0.000030056 -0.000006906 0.000052638 -0.000157300 0.000155292 -0.000426740 -0.000208509 0.000132942 0.000106842 -0.000058819 0.000079796 -0.000059340 -0.000116307 -0.000030739 0.000034549 -0.000191277 -0.000212789 -0.000032216 0.000173844 -0.000082663 0.000369663 0.000046737 -0.000082942 -0.000016427 0.000086767 0.000011657 0.000152139 0.000035375 -0.000019177 0.000008506 0.000069159 -0.000034596 -0.000028704 0.000013525 0.000047895 -0.000072729 0.000106633 0.000066599 -0.000101347 -0.000034341 0.000058587 0.000063569 -0.000024084 0.000004647 0.000086694 -0.000094557 0.000028481 0.000027435 0.000013485 -0.000001879 0.000146412 0.000109537 -0.000022921 -0.000033924 0.229853463 0.019213716 0.046645907 -0.141429910 -0.016601126 0.149172203 0.010408891 -0.007005697 0.023034356 0.073046139 0.001194293 -0.001326087 0.001810743 -0.028162279 0.061837882 -0.008257809 0.003892011 -0.014402643 0.088823017 -0.075279123 -0.007080876 0.023384629 -0.000094820 -0.004571395 0.008045537 -0.002819678 0.004793508 0.000472487 0.000918141 -0.004980003 0.004872020 -0.017906847 -0.001308399 -0.010577514 0.026951969 0.000085800 0.000007973 0.000158413 -0.000151437 0.000151319 0.000101798 0.000171493 0.000094774 -0.000007419 -0.000017210 -0.000116364 -0.000029713 -0.000245441 -0.000076527 0.000002712 -0.000139298 -0.000869336 -0.000484560 0.000513067 0.000400037 -0.000089423 -0.000056850 -0.000307515 0.000052691 -0.000018577 0.000501342 0.000874387 0.000739757 -0.000168400 -0.000277582 -0.000023170 0.000348148 -0.000051096 -0.000507905 -0.000371539 -0.000114486 0.000116966 -0.000165238 -0.000459244 -0.000105451 0.000056843 -0.000230254 0.000090144 0.000474089 0.000433834 -0.000011399 0.000050272 0.000027521 -0.000028436 0.000008053 -0.000000260 0.000022773 0.000022035 -0.000015480 -0.000009428 -0.000005601 0.000016226 0.000006992 -0.000034777 -0.000007985 0.000017941 -0.000022866 0.000005208 0.000038612 -0.000004491 -0.000022931 0.000025226 0.000009244 -0.000039881 -0.000022640 0.000003289 -0.000018449 -0.000018319 0.000007539 0.000011875 0.000006567 0.000019751 0.000017163 -0.000002824 0.000003057 0.000011435 0.000003696 -0.000002516 0.000006212 0.000004327 0.000008161 -0.000014673 -0.000011008 0.000015995 0.000011659 -0.000011477 0.000038979 -0.000007305 -0.000007808 0.000013730 0.000081619 0.000047239 -0.000013968 -0.000005565 0.000017240 -0.000031784 -0.000027741 0.000015359 0.000010403 -0.000018807 -0.000016077 -0.000020735 -0.000000439 0.000001026 -0.000007169 -0.000027402 -0.000022518 0.000002499 -0.000002039 -0.000009182 0.000015404 0.000002205 -0.000006825 -0.000003145 0.000002315 0.000012328 0.000007372 -0.000001861 0.000000419 0.000003989 0.000013741 0.000005106 -0.000001140 0.000000648 -0.000001275 -0.000033942 -0.000022900 0.000002579 -0.000003267 -0.000013735 -0.000043257 -0.000027234 0.000005802 -0.000000491 -0.000010401 -0.000059097 -0.000047501 0.000018079 0.000006491 -0.000030391 0.000023663 0.000008539 0.000003816 0.000007052 -0.000001818 0.000026431 -0.000000115 -0.000000493 0.000002202 -0.000004575 0.000031860 0.000024881 -0.000013808 -0.000007308 0.000018887 -0.000003130 -0.000002343 0.000000023 0.000001680 -0.000005245 -0.000003089 -0.000024409 0.000011074 0.000012564 -0.000016669 -0.000001890 -0.000003717 0.000011192 0.000007383 0.000008006 0.000033515 0.000028566 -0.000006560 -0.000001359 0.000021976 0.000001778 0.000006765 0.000003480 0.000000312 0.000000371 0.000011470 0.000004280 -0.000001648 0.000000237 0.000000178 0.000004682 0.000005700 -0.000002371 -0.000001590 0.000002881 0.000008573 0.000009983 0.000001510 -0.000000038 0.000003859 -0.000005681 -0.000006092 -0.000001317 0.000000201 -0.000001254 0.000004142 0.000002550 0.000002074 0.000000373 -0.000001048 0.000114109 0.000096981 -0.000022800 -0.000007999 0.000068993 0.000161230 0.000062502 -0.000014694 0.000018131 0.000036017 -0.000010576 -0.000025152 0.000056680 0.000019998 -0.000060299 0.000004001 0.000019740 -0.000006357 -0.000006695 0.000018901 0.000005581 -0.000003753 0.000005675 0.000008032 -0.000000689 -0.000001525 0.000012746 -0.000004400 -0.000005651 0.000012747 -0.000024573 0.000006773 -0.000007775 -0.000012590 0.000002754 0.000011973 0.000006201 -0.000001716 -0.000000056 0.000003599 -0.000036381 -0.000008299 0.000003936 -0.000001343 -0.000000882 -0.000006533 -0.000033935 -0.000021868 0.000033825 0.000131810 -0.000138968 0.000038242 -0.000059193 0.000015928 -0.000009363 0.000034210 -0.000131654 0.000022154 0.000004313 0.000016449 0.000172639 0.000040073 -0.000002010 0.000035743 -0.000103818 -0.000046927 0.000096372 0.000171787 0.000020514 -0.000000408 0.000305117 -0.000233727 -0.000079658 0.000016244 0.000082441 -0.000255900 -0.000062761 0.000024092 -0.000023462 0.000086388 -0.000290219 0.000146781 0.000040975 -0.000087650 -0.000156874 0.000015289 0.000172974 0.000114380 0.000050215 0.000044454 0.000237692 0.000066689 -0.000035001 0.000034725 0.000128735 -0.000044525 0.000033233 -0.000108407 -0.000016356 -0.000038849 -0.000187638 0.000007690 -0.000069531 -0.000052521 -0.000148970 -0.000107992 -0.000076546 0.000062571 0.000030606 -0.000103603 -0.000003722 -0.000021236 -0.000082399 0.000002539 -0.000023470 -0.000027879 -0.000024655 -0.000059561 -0.000000396 -0.000058047 -0.000003536 -0.000008084 -0.000028483 0.000002745 -0.000045106 -0.000033312 -0.000036694 -0.000062478 -0.000019843 -0.000044160 -0.000029886 0.000005684 -0.000012493 -0.000005224 0.000001405 -0.000021604 0.000106417 0.000039581 -0.000009763 0.000054505 0.000108995 -0.000012181 -0.000059535 -0.000001030 0.000028543 0.000031106 -0.000063944 -0.000009304 -0.000027331 0.000088215 0.000147441 0.000887863 -0.000219458 -0.000513716 -0.000105849 0.000365388 0.000164535 0.000032324 -0.000092010 -0.000185327 -0.000450968 -0.000110155 0.000164979 0.000345548 -0.001061480 0.000008083 0.000018106 -0.000017247 -0.000019715 0.000001344 0.000024998 0.000016545 0.000025954 0.000005692 -0.000007505 -0.000036691 -0.000025224 -0.000038295 0.000000432 0.000002109 0.000002402 0.000005301 0.000002850 0.000002812 -0.000008493 -0.000020008 0.000016954 0.000007356 -0.000001047 -0.000003666 0.000040945 -0.000026711 -0.000005172 0.000002811 -0.000003222 -0.000041306 -0.000055289 0.000022473 0.000012339 -0.000049816 -0.000052688 -0.000006823 0.000004561 -0.000011821 -0.000003124 0.000023655 0.000032214 -0.000041468 -0.000014789 0.000050497 -0.000073105 -0.000059075 0.000003455 0.000001063 -0.000035723 -0.000080030 -0.000019235 -0.000002717 -0.000015633 -0.000002060 -0.000032660 -0.000014219 -0.000021615 -0.000008602 0.000011791 -0.000080830 -0.000261576 0.000049332 0.000090168 0.000151920 -0.000078649 -0.000092150 -0.000027490 0.000037649 0.000316427 0.000028983 0.000013961 -0.000086313 -0.000081599 0.000428096 -0.000148424 -0.000364577 0.000154330 0.000118051 0.000048394 -0.000152659 -0.000186832 0.000007236 0.000364591 -0.000384259 0.000271535 0.000332465 -0.000107166 -0.000306606 0.000660922 0.000029631 0.000004023 -0.000000840 0.000002387 0.000001284 -0.000009772 -0.000006992 -0.000000035 -0.000001118 -0.000001582 -0.000014567 0.000004928 -0.000000115 -0.000002747 0.000002822 -0.000064183 -0.000011581 0.000001425 -0.000005294 -0.000003026 0.000023036 -0.000024230 0.000005393 0.000003645 -0.000004340 0.000030085 0.000008204 -0.000002302 0.000004207 0.000001220 -0.000019480 0.000007570 -0.000001112 -0.000003376 0.000002779 0.000019315 -0.000004335 0.000000501 0.000003714 -0.000002677 0.000009168 -0.000004074 -0.000000395 0.000001333 -0.000001326 0.000020663 -0.000000608 -0.000000174 0.000002049 -0.000000424 0.000004567 -0.000009148 0.000000926 0.000001915 -0.000003470 -0.000017373 0.000001710 -0.000001066 -0.000001942 0.000000558 0.000004393 0.000003632 -0.000000227 -0.000000031 0.000001145 -0.000007706 -0.000001635 0.000000758 -0.000001166 0.000000370 -0.000000187 -0.000000320 0.000000780 0.000000227 -0.000000184 0.000006970 0.000001396 -0.000000163 0.000001216 -0.000000472 0.000000454 -0.000000687 0.000000355 0.000000096 -0.000000106 -0.000004941 0.000000107 0.000000824 -0.000000949 0.000000763 0.000032026 -0.000000584 -0.000000715 0.000003986 -0.000001351 -0.000015122 0.000013591 -0.000002035 -0.000002491 0.000003231 -0.000018991 -0.000007783 0.000000343 -0.000001947 -0.000001559 0.000004260 -0.000007562 0.000000486 0.000001458 -0.000002910 -0.000000886 -0.000001555 0.000000386 0.000000307 -0.000000959 0.000000158 0.000004579 -0.000001663 -0.000000799 0.000001554 -0.000006611 -0.000002892 0.000001636 -0.000000724 0.000000380 -0.000001917 -0.000006114 0.000001632 0.000000125 -0.000001442 0.000003071 0.000007484 -0.000000364 0.000000218 0.000001593 0.000006035 -0.000000959 0.000000588 0.000000719 -0.000000329 0.000006293 -0.000000021 -0.000000017 0.000001056 -0.000000657 -0.000004762 0.000001512 0.000000397 -0.000000804 0.000000910 -0.000048590 0.000029252 -0.000010069 -0.000008840 0.000003505 -0.000068957 0.000009134 -0.000003171 -0.000007563 -0.000000242 -0.000031652 0.000008031 0.000002745 -0.000003533 0.000003300 -0.000002149 0.000005608 -0.000006182 -0.000002468 -0.000000440 0.000038870 -0.000007911 -0.000002397 0.000003198 -0.000003608 0.000004029 0.000011710 -0.000008973 0.000000198 -0.000005643 0.000014264 -0.000017247 0.000003449 0.000002518 -0.000002507 0.000029421 0.000009228 -0.000003685 0.000003725 -0.000000760 0.000014397 -0.000005231 -0.000001607 0.000000937 -0.000002796 -0.000006943 0.000012366 -0.000004716 -0.000000959 -0.000002953 -0.000004745 0.000012897 -0.000004119 -0.000001220 0.000000361 -0.000006742 0.000007891 -0.000004318 -0.000001699 -0.000002197 -0.000012056 0.000008205 -0.000002115 -0.000002359 0.000000966 -0.000004855 -0.000001585 0.000000799 -0.000000672 0.000000499 -0.000003602 0.000003857 0.000000840 0.000000060 0.000002058 0.000005626 0.000004388 -0.000002113 0.000000633 -0.000000788 0.000001622 0.000001052 -0.000000724 -0.000000239 -0.000000145 0.000001873 0.000001676 0.000000301 0.000000483 0.000000867 0.000004336 0.000006157 -0.000002340 0.000001564 -0.000002100 -0.000013935 -0.000022926 0.000008691 -0.000002231 0.000003258 -0.000007122 -0.000005367 -0.000000198 -0.000001175 -0.000002374 0.000003242 0.000017091 -0.000006497 -0.000000731 -0.000000615 0.000021671 -0.000006569 0.000001033 0.000001765 -0.000000546 0.000010375 0.000001423 -0.000002759 0.000000279 -0.000002577 -0.000003116 -0.000004113 0.000001446 -0.000000866 0.000000836 0.000010496 -0.000003806 -0.000000621 0.000001319 -0.000003013 0.000001991 -0.000000785 0.000001806 0.000000313 0.000002379 0.000002431 0.000003357 -0.000001787 0.000000586 -0.000001681 0.000005457 0.000002528 -0.000001695 0.000001080 -0.000001685 0.000003334 0.000001871 0.000000205 0.000000795 0.000000779 0.000054932 0.000045431 0.000007867 -0.000005508 0.000011767 0.000044299 0.000092238 0.000133098 0.000027256 -0.000063752 -0.000036066 -0.000085764 -0.000089387 -0.000022032 0.000013759 0.000017647 0.000010477 0.000010202 0.000007514 -0.000004765 0.000031095 0.000043859 0.000036169 0.000005777 -0.000013563 0.000013567 0.000028491 0.000033419 0.000007545 -0.000010550 0.000000868 0.000008427 -0.000007886 0.000001072 0.000013938 -0.000006100 -0.000004228 -0.000019718 0.000005641 0.000021108 0.000000818 0.000022231 -0.000011371 0.000013413 0.000041712 0.000008399 0.000000408 0.000007790 0.000005693 -0.000002393 -0.000018940 -0.000008996 -0.000015932 -0.000005503 0.000010107 0.000001636 -0.000000403 -0.000008327 0.000004418 0.000008741 -0.000609527 -0.000134383 0.000099783 -0.000062184 0.000161994 -0.000121783 -0.000289655 -0.000095483 0.000064577 0.000023052 -0.000152476 -0.000276572 -0.000451627 -0.000077377 0.000015701 -0.000002288 0.000065930 -0.000000191 -0.000012219 -0.000016849 -0.000030661 0.000126936 0.000052242 -0.000012863 -0.000025684 -0.000072118 0.000165830 -0.000006219 0.000049845 0.000096982 0.000908730 0.000113776 -0.000181930 0.000077688 -0.000164687 -0.000022241 -0.000496922 -0.000897834 -0.000120195 0.000019472 -0.000106694 -0.000754546 -0.000388422 -0.000018176 -0.000021720 0.000060202 0.000049663 0.000036858 0.000022891 -0.000010181 0.000233037 0.000126079 0.000034960 0.000018236 -0.000072404 0.000210482 0.000143029 0.000026571 0.000050710 -0.000035411 0.286298777 0.002541400 0.090752359 -0.002063501 -0.112263471 0.284946563 0.005227112 -0.012127397 0.024029097 0.043861332 0.000058905 -0.000602269 -0.000584455 0.000139732 0.093346355 -0.000062125 -0.000343118 -0.000012921 0.000014807 -0.107178269 -0.000048130 0.000429403 0.000374462 0.000126625 -0.035562482 0.000161645 0.000047422 -0.000119764 -0.000007070 0.011910405 -0.000083464 0.000273313 0.000271985 -0.000051918 -0.021091705 -0.000025288 -0.000231892 -0.000073839 -0.000026308 -0.007474152 -0.000207032 0.000118933 0.000180290 0.000078393 -0.005873866 -0.000068849 0.000028087 0.000073690 0.000107333 0.009479074 0.000335033 -0.000235738 -0.000252510 -0.000005782 0.005959334 0.000009154 -0.000007783 -0.000020432 0.000005832 0.000002182 -0.000002692 -0.000000672 -0.000000336 0.000010228 0.000064452 0.000003253 0.000012019 0.000002562 0.000020270 0.000041465 -0.000018526 -0.000016050 -0.000000031 -0.000020012 0.000044758 -0.000003012 0.000024565 0.000011570 0.000010528 -0.000083702 0.000008997 0.000001011 0.000001864 0.000001870 0.000007680 0.000000455 -0.000012271 -0.000011748 -0.000001638 0.000062291 -0.000000701 -0.000011685 -0.000008017 -0.000013005 -0.000011617 0.000006924 -0.000001527 0.000000994 -0.000000602 0.000017589 0.000015102 0.000006526 -0.000005855 -0.000015272 0.000007829 0.000015413 0.000002175 -0.000008012 -0.000023530 0.000016722 -0.000021066 -0.000008399 0.000004046 0.000010141 -0.000005746 -0.000003293 0.000000029 0.000004491 0.000008775 -0.000007237 -0.000004819 -0.000004391 0.000002665 0.000011528 -0.000007930 0.000005048 0.000002928 0.000001818 0.000002088 -0.000002010 0.000002547 0.000000979 -0.000001383 -0.000002299 0.000002590 -0.000001130 -0.000000329 0.000000122 -0.000003399 0.000001977 -0.000005077 -0.000000788 0.000005439 0.000007858 -0.000009155 -0.000007966 -0.000001201 0.000005689 0.000012055 -0.000009786 -0.000024560 -0.000010646 0.000007028 0.000014649 -0.000011716 -0.000006092 -0.000002386 -0.000001392 -0.000008140 0.000006770 -0.000003563 -0.000001397 0.000002745 -0.000003466 0.000001110 0.000017135 0.000004556 -0.000004642 -0.000006178 0.000004634 -0.000004615 -0.000001960 0.000000375 -0.000003209 0.000001086 -0.000018746 -0.000005975 0.000004850 0.000006078 -0.000003373 -0.000004546 0.000000184 -0.000002479 0.000008694 0.000001115 0.000013670 0.000007065 -0.000004478 -0.000006624 0.000006696 -0.000001556 -0.000001530 -0.000002441 -0.000004560 0.000003567 0.000000473 0.000000303 0.000000031 -0.000002894 0.000001837 0.000003030 0.000000878 -0.000001003 -0.000002328 0.000001446 0.000000411 -0.000002609 -0.000004181 -0.000005110 0.000005246 0.000000410 0.000001856 0.000002315 0.000003371 -0.000003141 -0.000001663 -0.000001494 -0.000001256 -0.000001880 0.000001989 0.000039204 0.000011976 -0.000022219 -0.000026453 0.000030303 0.000007512 0.000007907 -0.000005544 -0.000028003 0.000028368 -0.000066462 -0.000044750 -0.000009939 -0.000017510 0.000021009 0.000015723 0.000004436 -0.000006300 -0.000001073 0.000004119 -0.000007157 -0.000001099 0.000000877 0.000000892 0.000001344 0.000011954 0.000003584 -0.000004617 0.000000650 0.000002307 0.000010828 0.000003012 -0.000002111 -0.000002843 -0.000000807 0.000002018 0.000002122 -0.000000103 -0.000001262 0.000001141 -0.000000952 0.000000689 -0.000000343 0.000003978 -0.000002323 -0.000013936 -0.000038322 -0.000054732 0.000063208 0.000026708 -0.000014167 0.000131261 0.000019535 -0.000159017 0.000000728 -0.000024709 -0.000091134 -0.000147091 0.000106734 -0.000025990 -0.000037268 -0.000118740 -0.000263100 -0.000112730 -0.000034667 0.000004328 -0.000091002 -0.000340304 0.000310695 -0.000003146 -0.000100726 0.000099082 0.000586129 0.000185995 -0.000008525 0.000090441 -0.000346017 0.000346540 -0.000100478 0.000045135 0.000126320 0.000219203 -0.000089348 -0.000176259 0.000012394 -0.000035792 0.000287206 0.000246109 -0.000263719 0.000009377 -0.000053793 0.000156176 0.000030876 0.000227866 -0.000002963 0.000037799 -0.000065033 -0.000015225 -0.000026537 0.000002460 0.000075167 -0.000159092 -0.000096633 -0.000321626 0.000017139 0.000011261 -0.000161108 -0.000014048 -0.000199115 0.000007994 0.000019002 -0.000089254 -0.000006060 -0.000086582 0.000004967 0.000033083 -0.000193625 -0.000036835 -0.000109045 0.000003465 0.000011908 -0.000050796 -0.000000911 -0.000064025 -0.000005515 0.000022866 -0.000053509 0.000012756 -0.000028616 -0.000005164 0.000007267 0.000002896 0.000000074 -0.000010777 0.000004776 -0.000003476 0.000325642 -0.000046314 0.000067398 -0.000006735 -0.000015662 -0.000192077 -0.000778722 0.000201507 -0.000032318 -0.000012097 -0.000032643 0.000041267 0.000257459 0.000006550 0.000037437 0.002070357 -0.000074712 0.001101781 -0.000138895 -0.000177871 0.000219053 -0.000300674 0.000305573 0.000015611 -0.000052989 -0.001442558 -0.000013714 -0.003134493 0.000400454 -0.000000397 0.000053139 0.000029501 0.000040350 -0.000005154 -0.000012356 -0.000017402 -0.000008804 -0.000025084 0.000002361 0.000018726 -0.000042855 -0.000032117 -0.000008460 0.000003391 -0.000000192 -0.000015645 -0.000005432 -0.000018293 0.000002558 0.000001259 0.000002273 0.000002948 -0.000015534 0.000001626 -0.000004841 -0.000016402 -0.000004376 0.000015005 -0.000003279 -0.000036525 -0.000013964 0.000012067 0.000007616 -0.000010827 0.000003951 -0.000003662 -0.000004610 0.000006993 -0.000004766 0.000049543 0.000029644 0.000002735 0.000005869 -0.000008615 -0.000013765 0.000002089 0.000017988 0.000021426 -0.000024879 0.000011232 0.000001774 0.000000387 0.000014168 -0.000015082 0.000022070 0.000017712 0.000010389 0.000015267 -0.000018854 0.000023658 -0.000325145 0.000028714 0.000022224 -0.000038763 0.000079909 0.000018042 0.000161930 0.000439271 -0.000052359 0.000060033 0.000592782 0.000088713 0.000991171 -0.000198569 0.000037969 -0.001667205 0.000041938 -0.000870852 0.000119245 -0.000016774 -0.000176885 -0.000855477 -0.000746157 0.000116933 0.000056569 0.000876955 0.000196412 0.001757984 -0.000285876 -0.000000880 -0.000001113 0.000000003 0.000000185 0.000001787 -0.000001106 -0.000002101 -0.000000258 0.000004914 -0.000002478 0.000003588 0.000001775 -0.000001339 -0.000003310 0.000000775 0.000001580 -0.000000116 -0.000001579 0.000001972 -0.000004656 -0.000009270 -0.000011416 -0.000000304 0.000021469 -0.000007155 -0.000000899 0.000002982 0.000001830 -0.000006063 0.000004206 0.000004768 0.000002900 -0.000001458 -0.000006221 0.000001480 -0.000004141 -0.000001298 0.000002231 0.000002589 -0.000000534 -0.000001594 -0.000001378 0.000000889 0.000002907 -0.000001098 -0.000001850 -0.000001543 0.000000710 0.000002102 0.000000068 -0.000003768 -0.000002375 0.000001425 0.000005798 -0.000002590 0.000002580 0.000001724 -0.000000300 -0.000003125 -0.000000008 0.000000675 0.000000510 -0.000000521 -0.000001716 0.000001311 0.000000495 -0.000000679 -0.000000839 0.000001539 -0.000000800 -0.000000566 -0.000000015 -0.000000122 0.000000390 0.000000159 -0.000000880 0.000000816 0.000000801 -0.000001159 0.000000858 -0.000000343 -0.000000410 -0.000000124 0.000000658 -0.000000129 0.000000527 -0.000000267 -0.000000931 0.000000658 -0.000000075 -0.000003141 -0.000001201 0.000002009 0.000001379 0.000000598 0.000005380 0.000005417 -0.000000817 -0.000011416 0.000003786 0.000000331 -0.000002130 -0.000000616 0.000003613 -0.000002994 -0.000002919 -0.000002406 0.000001048 0.000004704 -0.000002252 -0.000000670 -0.000000503 0.000000310 0.000000419 -0.000000397 0.000002114 0.000001189 -0.000000229 -0.000003283 0.000001099 -0.000000318 -0.000001133 -0.000000913 0.000002849 -0.000000938 -0.000001740 -0.000002193 -0.000000105 0.000004653 -0.000001888 0.000001289 0.000003188 0.000000077 -0.000004789 0.000002572 -0.000001158 -0.000000497 0.000000230 0.000001489 -0.000000096 -0.000001061 0.000000280 0.000000762 -0.000000094 0.000000305 0.000000826 0.000000478 -0.000000710 -0.000000614 0.000000440 0.000013545 0.000012623 -0.000001170 -0.000027308 0.000007503 0.000006297 0.000005291 -0.000001171 -0.000010966 0.000000229 0.000002437 0.000003078 -0.000001835 -0.000002572 0.000000980 0.000002887 -0.000002366 0.000000044 -0.000007784 0.000001859 -0.000004348 -0.000007944 0.000000686 0.000006862 -0.000002413 0.000004806 -0.000002712 0.000000191 -0.000021375 0.000003089 -0.000005323 -0.000006791 0.000000113 0.000013806 -0.000003979 0.000000453 0.000002136 0.000001930 -0.000009268 0.000003278 -0.000001247 -0.000002706 0.000001111 0.000002242 -0.000001560 0.000004350 0.000004448 0.000001293 -0.000014990 0.000002449 0.000003673 0.000005004 0.000001017 -0.000011280 0.000003244 0.000003436 0.000002339 0.000000895 -0.000009719 0.000001082 0.000003673 0.000003138 -0.000000356 -0.000007592 0.000001963 0.000000097 -0.000000684 -0.000000705 0.000001587 -0.000000557 0.000000674 0.000001936 -0.000000556 -0.000001834 0.000001558 0.000001041 0.000001952 0.000001099 -0.000004602 0.000001175 0.000000487 -0.000000085 -0.000000020 -0.000001045 0.000000113 -0.000000007 0.000001075 0.000000022 -0.000000557 0.000000943 0.000001348 0.000003822 0.000001520 -0.000007718 0.000001395 -0.000004836 -0.000006903 -0.000003159 0.000024368 -0.000005104 0.000000225 -0.000003006 -0.000000590 0.000002148 -0.000002164 0.000004778 0.000005401 0.000001699 -0.000016567 0.000004575 -0.000003013 -0.000003425 0.000000159 0.000007362 -0.000001513 0.000000517 -0.000000987 0.000000946 -0.000003325 -0.000000389 -0.000000663 -0.000002416 -0.000001193 0.000004470 -0.000001199 -0.000001360 -0.000003149 0.000000404 0.000001143 -0.000001692 -0.000001042 0.000000705 -0.000000392 0.000003661 0.000000603 0.000000824 0.000001252 0.000000942 -0.000004677 0.000000437 0.000000370 0.000001135 0.000001200 -0.000003857 0.000000484 -0.000000266 0.000001604 0.000000376 -0.000000536 0.000001021 -0.000005641 -0.000000503 -0.000014341 -0.000021965 0.000009640 -0.000070525 0.000071514 0.000040660 0.000004638 -0.000116043 0.000034265 -0.000026562 -0.000000661 0.000019959 0.000056875 -0.000009278 -0.000000847 -0.000001217 -0.000010350 -0.000001354 -0.000019828 0.000009714 -0.000000811 -0.000014635 -0.000002508 -0.000014521 0.000012479 0.000004315 -0.000003578 -0.000011827 0.000010087 -0.000015174 -0.000013758 -0.000014251 0.000015248 0.000017552 -0.000016999 -0.000012500 -0.000008670 0.000023538 0.000025825 -0.000030929 -0.000031194 -0.000025006 0.000042477 -0.000005888 -0.000001885 -0.000000362 -0.000001688 0.000003610 0.000014392 -0.000006489 -0.000003558 0.000004176 0.000013173 0.000007217 -0.000015462 -0.000009003 -0.000006533 0.000023332 0.000183965 -0.000069918 0.000005376 0.000183471 0.000047862 0.000050440 -0.000091642 0.000043246 0.000123825 0.000042636 0.000118554 -0.000018168 0.000110798 0.000109825 -0.000024223 -0.000000421 0.000016266 -0.000002481 -0.000036675 0.000003574 -0.000020624 0.000047955 0.000010225 -0.000041581 -0.000021332 0.000054574 -0.000003413 -0.000058919 -0.000109153 0.000024226 -0.000187266 -0.000038559 -0.000061599 -0.000166192 -0.000002736 0.000080542 -0.000044376 -0.000049739 -0.000079054 0.000025358 -0.000027782 -0.000052516 0.000005981 0.000169288 0.000004080 -0.000030711 0.000012495 -0.000010028 -0.000034711 -0.000010744 -0.000079266 0.000014230 -0.000001393 -0.000070128 -0.000002561 -0.000058273 -0.000011270 -0.000023156 -0.000092556 0.000004618 0.259230833 0.078260308 0.067436758 0.009253703 0.004933402 0.202178008 -0.013622207 -0.006157960 0.132207855 0.152766042 -0.004571640 -0.003670188 0.068788116 0.055102730 0.067321424 0.003651690 -0.010563012 -0.008761032 0.011463193 -0.016982241 -0.009118891 0.022649735 -0.007826881 0.009472213 -0.016998761 -0.005154975 0.009903817 -0.000934099 0.003596794 -0.006005836 0.000147275 0.000024436 0.000168071 0.000086195 0.000060285 0.000060665 0.000068735 0.000630843 -0.000665053 -0.000329964 0.000070561 -0.000059110 0.000250935 -0.000324136 0.000199929 -0.000057709 0.000058504 -0.000070479 0.000008752 -0.000121273 0.000057710 -0.000060501 0.000047799 0.000020747 0.000051641 -0.000029576 -0.000002601 -0.000066112 0.000041824 0.000002540 0.000070045 0.000034364 0.000162249 -0.000039729 -0.000029058 -0.000037153 -0.000022385 -0.000122529 0.000023582 0.000022681 -0.000034578 0.000027796 -0.000053037 0.000015135 -0.000006675 -0.000001496 -0.000008061 -0.000005066 0.000002944 0.000003308 -0.000000799 -0.000017055 -0.000016068 0.000002383 0.000010284 0.000001256 0.000005438 0.000003501 -0.000001489 -0.000002190 0.000000757 0.000006873 0.000006907 -0.000001642 -0.000004572 0.000000781 0.000006627 0.000008814 -0.000000283 -0.000003877 0.000000451 0.000002321 0.000002090 -0.000001393 -0.000001030 -0.000000054 -0.000002075 -0.000002453 -0.000000109 0.000001426 0.000000375 -0.000001840 -0.000003030 -0.000000592 0.000001834 0.000001254 0.000007454 0.000009799 -0.000001285 -0.000004815 0.000000069 0.000009427 0.000010612 -0.000000673 -0.000005582 0.000002784 0.000009929 0.000011172 -0.000002067 -0.000005655 0.000000655 -0.000006714 -0.000008529 -0.000000452 0.000004595 0.000000878 -0.000001910 -0.000003688 -0.000001211 0.000001423 -0.000001397 -0.000004587 -0.000002627 0.000001582 0.000002376 0.000000062 -0.000001598 -0.000002924 0.000000487 -0.000000176 0.000002001 0.000003227 0.000001173 -0.000002674 -0.000000862 -0.000000522 0.000002360 -0.000000108 -0.000000654 0.000000321 -0.000001698 -0.000004974 -0.000005333 0.000001153 0.000002785 -0.000000420 -0.000003639 -0.000003253 0.000001209 0.000002599 0.000000392 -0.000001814 -0.000002015 -0.000000428 0.000001211 -0.000000268 -0.000001451 -0.000001256 0.000000432 0.000000759 -0.000000813 -0.000005310 -0.000004986 0.000001944 0.000003621 0.000000090 0.000003295 0.000002501 -0.000000965 -0.000002371 -0.000000046 -0.000002025 -0.000001593 0.000000340 0.000002002 -0.000008446 -0.000023689 -0.000033238 0.000007495 0.000014965 -0.000003252 -0.000021955 -0.000044252 -0.000000913 0.000012510 0.000004348 -0.000023982 -0.000029420 0.000002201 0.000022698 -0.000002707 -0.000001836 -0.000000914 0.000002660 0.000001641 0.000000189 -0.000000065 -0.000003142 -0.000000967 0.000000233 -0.000001655 -0.000000490 -0.000000001 0.000001424 0.000000543 -0.000001350 -0.000000083 0.000002937 0.000002359 -0.000001120 0.000000248 -0.000001001 -0.000001033 -0.000000501 0.000000746 -0.000000678 0.000003000 0.000003094 0.000000768 -0.000002355 0.000007292 -0.000029309 -0.000001704 0.000000180 -0.000013083 -0.000001000 0.000005348 -0.000008226 -0.000002894 0.000006229 -0.000009082 0.000024911 0.000022630 0.000011108 -0.000014734 -0.000006393 0.000013914 0.000011534 0.000010997 0.000000272 -0.000000535 0.000006009 0.000005988 -0.000001677 -0.000003589 -0.000004568 0.000039493 0.000012414 -0.000006754 0.000003512 0.000018391 -0.000087711 -0.000000246 0.000006504 -0.000026837 0.000003666 0.000007174 -0.000029316 -0.000009287 0.000028102 -0.000005398 0.000010913 -0.000021887 -0.000009015 0.000018764 -0.000001646 0.000014510 -0.000005504 -0.000004973 0.000011473 0.000002319 -0.000010170 -0.000004384 -0.000001803 0.000001456 0.000008320 -0.000044676 -0.000009785 0.000000895 -0.000000203 0.000004923 -0.000028861 0.000008281 0.000005693 -0.000015411 0.000003849 -0.000014463 0.000001706 0.000001544 -0.000008094 0.000003451 -0.000022757 0.000004730 0.000006317 -0.000011949 0.000000567 -0.000004792 0.000004802 0.000002983 -0.000003657 -0.000000808 -0.000001486 0.000009262 0.000005006 -0.000007403 0.000001042 -0.000003313 -0.000002122 -0.000001075 -0.000000787 -0.000006599 0.000015672 -0.000011012 -0.000001643 0.000011600 -0.000008156 0.000018541 0.000027491 0.000017799 -0.000019065 0.000000615 0.000013182 0.000003856 -0.000004236 -0.000003519 -0.000052782 0.000386503 -0.000089772 -0.000072439 0.000194168 0.000013726 0.000034414 -0.000038384 -0.000053018 0.000094663 0.000136049 -0.000456947 -0.000233702 -0.000200795 0.000222592 -0.000002170 0.000015861 -0.000003110 -0.000004709 0.000009398 -0.000001271 -0.000003358 -0.000002290 0.000000620 0.000004817 0.000002617 -0.000009304 -0.000000042 0.000000555 -0.000005089 0.000001003 -0.000004217 -0.000001300 -0.000000535 0.000000413 -0.000000760 -0.000002996 -0.000000384 0.000001869 0.000000183 -0.000000347 0.000003527 0.000001431 -0.000000531 0.000000447 0.000006520 0.000006050 0.000009590 -0.000005349 -0.000002993 -0.000000887 0.000003639 0.000011523 0.000002814 0.000000047 -0.000003557 0.000011042 0.000014569 -0.000000019 -0.000012395 0.000006078 0.000021572 0.000029033 -0.000007015 -0.000015021 0.000000173 0.000011544 0.000027156 0.000002286 -0.000007802 -0.000000416 0.000017877 0.000022593 -0.000002046 -0.000015899 -0.000013877 -0.000049723 0.000067062 0.000070739 -0.000103875 -0.000015598 0.000008320 0.000083330 0.000067770 -0.000129406 -0.000074240 0.000197907 0.000110215 0.000112933 -0.000117971 0.000060224 -0.000295469 0.000013492 0.000007606 -0.000059688 0.000037282 -0.000196516 -0.000025730 -0.000016747 -0.000016785 -0.000115450 0.000333464 0.000123385 0.000121381 -0.000097827 0.000000511 -0.000001313 -0.000002810 -0.000001045 0.000001765 -0.000000590 0.000002194 0.000002627 0.000000727 -0.000001087 -0.000000789 -0.000001180 0.000000332 0.000001544 -0.000000271 -0.000002079 0.000002972 0.000006592 0.000003493 -0.000003630 -0.000001427 0.000006863 0.000005543 0.000000763 -0.000001183 0.000002479 -0.000002754 -0.000005693 -0.000003475 0.000002068 -0.000000548 -0.000002082 -0.000000284 0.000001476 -0.000000149 0.000001104 0.000000978 -0.000000450 -0.000001805 0.000000048 0.000000299 0.000001083 0.000000576 -0.000000627 -0.000000248 0.000000709 0.000000223 -0.000001095 -0.000001119 0.000000679 0.000000221 0.000002652 0.000002033 -0.000000745 -0.000000831 -0.000000026 -0.000000543 0.000000636 0.000000676 -0.000000957 -0.000000026 -0.000001100 -0.000001372 -0.000000025 0.000000818 -0.000000634 0.000000595 0.000001059 0.000000855 -0.000000312 -0.000000122 0.000000103 -0.000000152 -0.000000076 0.000000223 0.000000524 -0.000000399 -0.000001055 -0.000000920 0.000000465 -0.000000091 0.000000145 0.000000027 0.000000063 0.000000034 -0.000000652 0.000000079 0.000000339 0.000000729 0.000000161 0.000001563 0.000000003 -0.000002027 -0.000002354 0.000000894 0.000000010 -0.000004029 -0.000002334 0.000000683 0.000000724 -0.000000970 0.000001919 0.000003458 0.000001620 -0.000001665 0.000000142 0.000002033 0.000001715 -0.000000389 -0.000000761 0.000000359 0.000000242 -0.000000033 -0.000000249 -0.000000287 0.000000165 -0.000001342 -0.000000734 0.000000207 0.000000132 -0.000000770 0.000000896 0.000001134 0.000000856 -0.000000291 -0.000000169 0.000001863 0.000001382 0.000000079 -0.000000598 0.000000261 -0.000001838 -0.000002285 -0.000000677 0.000001181 0.000000129 0.000000459 -0.000000256 -0.000000451 0.000000314 0.000000511 0.000000062 -0.000000567 -0.000000839 0.000000195 -0.000000465 -0.000000354 -0.000000127 0.000000506 0.000000231 0.000000328 -0.000007948 -0.000004731 0.000001253 0.000000871 -0.000000638 -0.000001124 0.000002343 0.000002421 -0.000002610 -0.000001081 -0.000000625 0.000000532 0.000001780 -0.000000556 0.000000256 -0.000002514 -0.000000734 0.000000525 -0.000000259 0.000000690 0.000002339 0.000000389 -0.000001270 0.000000434 0.000001846 -0.000005089 -0.000002620 -0.000001206 0.000000527 -0.000000172 0.000004309 0.000002647 -0.000000454 -0.000000981 0.000001676 -0.000003167 -0.000003826 -0.000002315 0.000001868 0.000000543 0.000000804 0.000000705 -0.000000530 -0.000000252 0.000001025 -0.000003505 -0.000002006 -0.000000638 0.000000711 0.000001169 -0.000003248 -0.000002827 -0.000000975 0.000000622 0.000000688 -0.000002394 -0.000000770 -0.000000002 0.000000059 0.000000087 -0.000002367 -0.000001162 0.000000521 0.000000252 -0.000000553 0.000000462 0.000000776 0.000000699 -0.000000205 -0.000000169 -0.000000840 -0.000001180 -0.000000033 0.000000568 0.000000957 -0.000001423 -0.000001466 -0.000001015 0.000000370 0.000000009 -0.000000392 -0.000000165 0.000000118 0.000000130 0.000000171 -0.000000258 -0.000000922 -0.000000538 0.000000350 0.000000883 -0.000001403 -0.000001653 -0.000001376 0.000000847 -0.000002654 0.000006455 0.000005135 0.000002561 -0.000001936 -0.000000538 0.000001041 0.000001988 0.000001096 -0.000000860 0.000001741 -0.000004999 -0.000004112 -0.000001508 0.000001189 -0.000000202 0.000001811 0.000000436 -0.000000333 0.000000509 0.000000432 -0.000000992 -0.000000186 -0.000000009 0.000000280 -0.000000857 0.000001119 0.000001300 0.000001098 -0.000000383 0.000000099 0.000000860 0.000000813 -0.000000134 -0.000000021 -0.000000187 0.000000795 -0.000000472 -0.000000436 0.000000295 0.000000616 -0.000001006 -0.000000668 -0.000000569 0.000000262 0.000000836 -0.000000930 -0.000000842 -0.000000912 0.000000204 0.000000301 -0.000000173 -0.000000995 -0.000000819 0.000000404 0.000009769 -0.000037361 -0.000030338 0.000002350 0.000028210 -0.000028212 0.000131869 0.000059021 -0.000014836 -0.000054038 0.000024137 -0.000054600 -0.000018739 -0.000005414 0.000032050 -0.000003416 -0.000000536 -0.000009127 0.000002149 0.000000728 0.000004653 0.000006589 0.000022728 -0.000001812 -0.000004318 0.000002592 0.000014578 0.000021086 -0.000004968 -0.000008033 0.000000239 -0.000019911 -0.000014567 0.000007277 0.000005507 0.000005949 -0.000029751 -0.000012405 0.000005768 0.000006667 0.000011165 -0.000049757 -0.000002593 0.000016032 -0.000003891 0.000001298 -0.000000577 0.000005608 0.000000183 -0.000003872 0.000005435 -0.000009002 0.000007242 -0.000001417 0.000001005 0.000003020 -0.000019971 -0.000005415 0.000005058 0.000001902 0.000005597 -0.000052458 -0.000056357 0.000002893 0.000040848 0.000007872 -0.000047756 -0.000061975 0.000001176 0.000036396 -0.000008693 0.000039658 -0.000067468 -0.000020174 0.000069137 -0.000000966 -0.000005680 -0.000001248 -0.000000675 0.000002179 -0.000000055 0.000025081 0.000020575 -0.000010028 -0.000006665 0.000005308 -0.000047586 0.000004743 0.000025540 -0.000043104 -0.000010710 0.000005187 0.000030250 0.000009028 -0.000011076 0.000003739 -0.000025234 -0.000021574 -0.000000845 0.000020254 0.000009106 0.000012317 -0.000023310 -0.000020582 0.000031595 -0.000001279 0.000009504 0.000023332 0.000002880 -0.000020459 0.000000127 0.000008349 0.000007054 -0.000004048 0.000009815 -0.000000796 -0.000008360 0.000011199 0.000008076 -0.000018268 0.098698373 -0.054851151 0.095029162 0.106926935 -0.098327536 0.227765044 -0.000059581 -0.000157783 -0.000154645 0.258925796 0.000041257 0.000046838 -0.000041837 -0.133112964 0.133573884 -0.000093373 -0.000107765 -0.000130473 -0.004392124 -0.004118342 0.000065867 0.000174687 0.000200227 -0.010955697 -0.007906734 0.000048759 -0.000139287 -0.000273518 0.010350005 0.005277646 -0.000002223 0.000022486 0.000074159 0.000482624 -0.000122790 -0.000016801 -0.000020667 -0.000003899 0.009287025 0.025877181 -0.000009963 0.000025644 0.000052235 -0.004396314 -0.011364934 -0.000019947 0.000057196 0.000108678 -0.000792894 0.001544760 -0.000008143 0.000002357 0.000010565 0.000013867 -0.000002575 -0.000008827 0.000005630 0.000014914 0.000023105 -0.000002748 0.000009385 -0.000000643 -0.000012096 -0.000007396 0.000003175 0.000003294 -0.000003536 -0.000005420 -0.000011800 0.000001096 0.000002033 -0.000004164 -0.000006134 -0.000007454 0.000002707 -0.000000584 -0.000001959 0.000000190 -0.000005401 0.000000591 -0.000000867 0.000001098 0.000001978 0.000002079 -0.000000141 0.000000633 0.000000760 0.000000089 0.000002445 0.000000417 0.000003495 -0.000005399 -0.000007916 -0.000013934 0.000003860 0.000003207 -0.000003714 -0.000007731 -0.000013702 0.000002445 0.000011803 -0.000004548 -0.000018146 -0.000011533 0.000008820 0.000002246 0.000003127 0.000000621 0.000007014 0.000000411 0.000002167 -0.000000057 -0.000000092 0.000001433 0.000000649 -0.000009069 0.000000271 0.000010777 0.000006368 -0.000003804 0.000002584 0.000001778 -0.000000623 0.000001450 -0.000002746 0.000008973 -0.000000796 -0.000010544 -0.000007953 0.000003985 0.000000795 0.000002829 -0.000001408 0.000001370 0.000001412 -0.000007798 0.000002646 0.000011063 0.000007801 -0.000003721 -0.000000989 0.000001996 0.000001341 0.000007033 -0.000000150 0.000000043 0.000000373 0.000000621 0.000001189 0.000000644 -0.000001563 0.000000468 0.000002199 0.000002408 -0.000000715 -0.000002608 0.000002912 0.000003783 0.000010661 -0.000001552 0.000001421 -0.000001372 -0.000001587 -0.000006673 -0.000000342 -0.000000263 0.000000731 -0.000000170 0.000003951 0.000001218 -0.000023533 0.000018999 0.000040470 0.000041541 -0.000031573 0.000000013 0.000020520 0.000024776 0.000014683 -0.000030357 0.000018649 0.000014437 -0.000020714 0.000040953 -0.000007036 -0.000009742 0.000002608 0.000010260 0.000009691 -0.000002724 0.000003595 0.000002217 -0.000001754 -0.000000718 -0.000000233 -0.000005801 0.000001611 0.000005878 0.000005529 -0.000001817 -0.000004920 -0.000000888 0.000003942 0.000002946 -0.000001579 -0.000000676 -0.000000193 0.000001227 0.000000345 0.000000367 0.000000486 0.000000379 -0.000001609 -0.000001436 -0.000000313 -0.000015519 -0.000001654 0.000029240 0.000017724 0.000004642 0.000004146 0.000004623 -0.000004328 -0.000000456 0.000001336 -0.000003521 0.000001615 -0.000004771 -0.000010718 -0.000005831 0.000002224 -0.000009172 -0.000009343 -0.000013146 -0.000003993 0.000005525 0.000002064 -0.000012976 -0.000004931 -0.000000934 0.000016840 0.000012922 -0.000031039 -0.000015612 -0.000005776 -0.000028346 -0.000025400 0.000051193 0.000028674 0.000008716 0.000019280 0.000014320 -0.000022171 0.000002513 0.000000053 0.000006545 0.000013783 -0.000004333 0.000007326 0.000001632 0.000014007 0.000008445 -0.000018026 -0.000004016 -0.000000859 -0.000001340 -0.000003895 0.000004813 0.000000416 0.000002893 -0.000008344 -0.000016616 0.000018573 0.000012519 0.000005143 -0.000011903 -0.000014044 0.000017637 0.000005701 0.000001777 -0.000009841 -0.000007434 0.000015652 0.000002558 0.000003139 -0.000015365 -0.000011695 0.000023107 0.000006863 0.000001835 -0.000003481 -0.000007085 0.000003999 -0.000001380 -0.000000198 -0.000006180 -0.000005133 0.000005127 0.000000371 -0.000001965 -0.000001072 0.000000872 0.000003022 0.000002151 0.000000993 0.000007244 0.000010607 -0.000010062 -0.000003109 0.000000004 -0.000009894 -0.000004662 0.000004047 -0.000006747 -0.000006717 0.000002232 0.000009119 -0.000004707 -0.000001820 -0.000000868 0.000176634 0.000157590 -0.000283035 -0.000126297 -0.000032182 0.000128722 0.000037128 -0.000179254 -0.000034773 -0.000017779 0.000179425 -0.000077983 -0.000184918 0.000067633 0.000049498 0.000010630 0.000005847 -0.000016617 -0.000008054 -0.000001167 0.000005343 0.000001509 -0.000007364 0.000003894 -0.000002048 -0.000009016 -0.000004462 0.000014065 0.000002032 0.000003384 -0.000000099 -0.000000884 0.000000888 0.000001575 0.000000733 -0.000001713 0.000000325 0.000001877 0.000004416 -0.000001118 0.000001872 -0.000000333 -0.000003429 -0.000003610 0.000000192 0.000019250 -0.000008039 -0.000027292 -0.000020362 0.000014441 -0.000006714 -0.000004188 -0.000001953 0.000009728 0.000007316 -0.000016937 -0.000006806 0.000020710 -0.000017935 0.000001521 0.000013583 -0.000016539 -0.000025146 -0.000038713 0.000027088 -0.000007977 -0.000012389 -0.000005144 -0.000006853 0.000016114 -0.000003150 -0.000011502 0.000000317 -0.000033087 0.000004571 -0.000090366 -0.000040171 0.000132091 0.000035826 0.000000708 -0.000132395 -0.000024332 0.000180424 0.000023013 0.000012408 -0.000113197 0.000021386 0.000125529 -0.000021623 -0.000021687 -0.000029795 -0.000100078 0.000081664 0.000068524 0.000020485 -0.000043701 -0.000057756 0.000079631 0.000039088 0.000026590 -0.000076965 0.000060428 0.000058214 -0.000061497 -0.000038449 0.000000791 0.000000553 0.000000269 0.000000820 0.000000335 -0.000000046 -0.000000593 -0.000001250 -0.000001072 -0.000000570 -0.000002375 0.000000492 0.000002383 0.000002576 -0.000001146 -0.000002407 -0.000001226 -0.000000174 -0.000000031 -0.000002004 0.000002412 -0.000001249 -0.000006029 -0.000005778 -0.000000724 0.000002442 0.000000732 0.000000547 0.000000091 0.000002185 -0.000002700 0.000000389 0.000003216 0.000003584 -0.000001112 0.000002865 -0.000000359 -0.000002795 -0.000004059 0.000001696 0.000001112 -0.000000563 -0.000001350 -0.000002221 0.000000421 0.000001337 -0.000000113 -0.000000893 -0.000001061 0.000000520 0.000002007 -0.000000941 -0.000003129 -0.000003942 0.000000747 -0.000001081 -0.000000272 0.000001413 0.000000728 -0.000000387 -0.000000382 0.000000536 0.000000877 0.000001635 -0.000000109 -0.000000838 -0.000000024 0.000000285 0.000000769 -0.000000775 0.000000164 0.000000221 -0.000000305 0.000000189 0.000000104 0.000000930 0.000000185 -0.000000573 -0.000000681 0.000000826 0.000000070 0.000000057 -0.000000138 0.000000015 -0.000000048 -0.000000862 0.000000291 0.000000469 0.000001286 -0.000000647 0.000002703 -0.000000239 -0.000001777 -0.000002816 0.000001675 -0.000002401 0.000000878 0.000003773 0.000004212 -0.000000264 -0.000000971 -0.000000941 -0.000000415 -0.000000902 -0.000001070 0.000001509 -0.000000841 -0.000002357 -0.000003090 0.000000470 0.000000568 -0.000000230 -0.000000305 -0.000000417 0.000000192 -0.000000908 0.000000143 0.000001501 0.000001098 -0.000000165 -0.000000570 0.000000131 -0.000000144 0.000000483 -0.000000700 0.000000624 -0.000000414 -0.000001261 -0.000001127 -0.000000221 -0.000000151 0.000000791 0.000000999 0.000001612 0.000000450 0.000000614 0.000000093 -0.000000703 -0.000000462 0.000000222 0.000000963 0.000000006 -0.000000759 -0.000001056 0.000000719 -0.000000750 0.000000374 0.000000655 0.000001314 -0.000000420 -0.000004918 0.000001634 0.000008124 0.000009104 -0.000000555 -0.000003021 0.000000187 0.000002875 0.000003479 -0.000001157 -0.000002290 0.000001298 0.000001992 0.000003452 -0.000001152 -0.000001390 0.000000231 0.000002063 0.000001669 0.000000123 0.000002128 -0.000000831 -0.000002655 -0.000003608 0.000000610 -0.000000428 -0.000001467 0.000002463 0.000000422 0.000001542 0.000002110 -0.000000826 -0.000003487 -0.000003881 0.000000003 0.000001361 -0.000000130 0.000000398 -0.000000833 0.000001860 0.000000978 -0.000001180 -0.000001113 -0.000002275 0.000000329 -0.000000679 -0.000000732 0.000002008 0.000001288 0.000000727 -0.000000350 0.000000190 0.000002210 0.000001764 0.000000851 -0.000000806 -0.000000892 0.000001659 0.000000830 0.000000216 -0.000001542 0.000000295 0.000002347 0.000002571 -0.000000249 -0.000000599 0.000000116 0.000000127 0.000000521 -0.000000558 -0.000000400 0.000000924 0.000000766 0.000001570 0.000000002 0.000000575 -0.000000473 0.000000506 -0.000000268 0.000000740 -0.000000239 -0.000000118 0.000000347 0.000000250 -0.000000089 0.000000301 0.000000474 0.000000067 0.000000237 0.000000347 0.000000759 -0.000000471 0.000000066 -0.000000727 0.000001019 -0.000000462 0.000001098 -0.000002603 -0.000000495 -0.000002309 -0.000000549 -0.000000864 -0.000000173 -0.000000289 -0.000000797 -0.000000330 -0.000000084 0.000002886 0.000001824 0.000001429 0.000000958 -0.000000116 -0.000001666 -0.000001630 -0.000000051 -0.000000016 -0.000001052 0.000000281 -0.000000495 0.000000092 -0.000000691 0.000000275 -0.000000128 0.000000432 -0.000000825 0.000000631 -0.000000993 -0.000001032 -0.000001534 0.000000014 0.000000359 0.000000947 -0.000000472 0.000000113 0.000000131 0.000000291 -0.000000650 0.000000238 -0.000000343 0.000000434 0.000000754 -0.000000717 -0.000000044 -0.000000893 0.000000723 0.000000573 0.000000445 -0.000000220 -0.000000197 0.000000559 0.000007075 0.000012214 -0.000019810 0.000053592 -0.000034782 0.000047605 -0.000015074 -0.000056483 -0.000114356 -0.000046061 -0.000020763 0.000001957 0.000013764 -0.000134857 0.000024753 0.000000470 0.000002546 0.000002667 0.000008634 0.000022550 0.000004012 -0.000005665 -0.000014792 -0.000052682 -0.000009655 0.000005089 -0.000007760 -0.000013614 -0.000118233 -0.000006387 -0.000011909 0.000004566 0.000019456 0.000057174 -0.000005546 -0.000015723 0.000002265 0.000021366 0.000022851 0.000025679 -0.000029046 0.000005227 0.000041566 0.000058203 -0.000026388 0.000000828 -0.000000876 0.000000189 -0.000001811 -0.000009870 -0.000009294 -0.000003991 0.000008482 -0.000055342 -0.000013691 -0.000013239 0.000003228 0.000019961 0.000015564 -0.000013545 -0.000041131 0.000004977 0.000061444 0.000286823 0.000079312 -0.000033832 0.000009551 0.000058727 0.000051160 0.000014241 0.000044225 0.000016635 -0.000041738 0.000170215 0.000023518 0.000003525 0.000003328 -0.000005815 -0.000038396 -0.000011203 0.000015825 -0.000007410 -0.000032014 -0.000129935 -0.000025108 -0.000080999 -0.000012929 0.000115512 0.000085789 0.000002931 0.000042484 0.000008833 -0.000058597 -0.000030520 0.000000353 0.000005471 0.000006528 0.000006127 -0.000018470 -0.000015557 0.000025130 0.000006467 -0.000030601 -0.000023576 -0.000016543 -0.000002975 -0.000006081 0.000001701 -0.000017885 0.000015989 0.000027060 0.000004658 -0.000041757 -0.000013601 0.000012822 -0.000005847 -0.000000646 0.000011688 -0.000018229 0.000003568 0.057089748 -0.019177651 0.148959690 0.014519547 0.042088045 0.064420399 0.003544719 0.127506504 0.053912615 0.241249843 0.000456651 -0.001459247 -0.017172531 0.001022322 0.063564300 -0.001139936 0.000702785 -0.002367738 0.000367886 0.062231057 0.000810412 -0.002252304 -0.023564145 0.003727714 -0.005877409 -0.000001623 -0.000007374 0.000004987 -0.000005467 0.000000199 -0.000006208 -0.000005696 0.000010911 -0.000011147 -0.000000733 -0.000012628 0.000021501 -0.000007786 -0.000006623 0.000006121 0.000007250 -0.000001335 -0.000003398 0.000008226 -0.000001411 -0.000003786 0.000003853 -0.000007856 -0.000002250 0.000006439 0.000009078 -0.000008194 -0.000000920 0.000008175 -0.000001667 -0.000000666 -0.000003526 0.000001621 -0.000001094 0.000000551 -0.000001445 0.000004795 -0.000001029 -0.000001947 0.000000973 -0.000001792 -0.000000603 -0.000010507 -0.000000356 0.000005932 0.000006237 -0.000006861 -0.000007364 0.000012446 0.000001652 -0.000017402 0.000030825 -0.000015832 -0.000005957 0.000019171 -0.000010777 0.000013406 0.000003991 -0.000012017 0.000001807 0.000005333 -0.000003785 0.000006626 0.000003436 -0.000003051 0.000009281 -0.000016460 0.000005063 0.000004617 -0.000005344 -0.000000003 0.000006618 0.000006001 0.000000696 -0.000006851 -0.000009926 0.000016502 -0.000006587 -0.000006980 0.000005864 -0.000002305 0.000000508 -0.000002830 -0.000002269 0.000004850 0.000013089 -0.000019736 0.000009973 0.000007390 -0.000008080 -0.000008527 0.000005199 -0.000000036 -0.000009025 0.000003391 -0.000001168 0.000000674 0.000000042 -0.000001757 0.000000828 0.000000942 -0.000002304 0.000001635 0.000000200 -0.000000966 -0.000009017 0.000003799 0.000002403 -0.000009757 0.000001615 0.000007786 -0.000003463 0.000000252 0.000008120 -0.000004197 -0.000007257 0.000004476 -0.000002203 -0.000007802 0.000004979 0.000032048 -0.000043813 0.000054224 0.000019944 -0.000059079 0.000045260 -0.000022408 0.000062003 0.000033543 -0.000084292 -0.000127789 0.000128281 -0.000029137 -0.000112806 0.000017612 0.000008200 -0.000020849 0.000003512 0.000003996 -0.000001080 0.000001814 0.000002658 0.000004114 0.000001974 -0.000003365 0.000003937 -0.000009239 0.000001103 0.000004433 -0.000000806 0.000001580 -0.000006679 0.000000293 0.000000653 -0.000000051 0.000001803 -0.000002940 0.000000642 0.000000827 0.000000042 -0.000000886 0.000001047 -0.000001466 -0.000000091 0.000000510 -0.000000005 -0.000004064 0.000009879 -0.000006838 0.000003181 0.000000740 0.000000025 0.000000711 0.000000173 0.000000254 -0.000002208 0.000002344 -0.000007787 0.000004532 -0.000002898 -0.000001629 0.000004413 -0.000008071 0.000005385 -0.000002652 0.000000453 0.000001209 -0.000002415 0.000002121 -0.000000923 0.000001090 0.000001693 -0.000008903 0.000006717 -0.000003766 0.000003846 -0.000011244 0.000018464 -0.000007710 0.000003121 0.000002149 -0.000001896 0.000003345 -0.000002094 -0.000000023 -0.000002350 0.000001563 0.000003766 -0.000005499 0.000002409 -0.000002042 0.000004944 -0.000003736 -0.000001597 0.000001285 0.000002577 -0.000001530 0.000002081 0.000001134 0.000000049 0.000000608 -0.000002427 0.000007434 -0.000004663 0.000002993 0.000002254 -0.000004513 0.000004623 0.000001046 -0.000000550 0.000002403 -0.000002500 0.000003409 0.000000967 -0.000000079 -0.000000177 -0.000002166 0.000004217 -0.000001794 0.000000358 -0.000000324 0.000000727 -0.000000945 0.000000706 -0.000000176 -0.000000561 -0.000001118 -0.000000855 0.000000324 -0.000000742 0.000000794 -0.000001176 0.000001771 -0.000000477 0.000000213 0.000000087 0.000000870 -0.000000911 0.000000956 -0.000000452 -0.000003589 0.000002420 -0.000007323 0.000002427 -0.000002297 0.000000329 0.000000097 -0.000001311 0.000000536 -0.000000224 0.000008116 0.000024383 -0.000063946 0.000044953 -0.000023893 0.000001830 0.000007905 -0.000021955 0.000006033 -0.000006545 0.000035449 -0.000022385 0.000053181 -0.000037768 0.000028023 0.000002751 -0.000000498 -0.000002991 0.000004326 -0.000002116 -0.000003971 0.000002685 -0.000000652 -0.000004255 0.000001539 0.000002570 -0.000002124 0.000002700 0.000000478 0.000000393 -0.000000946 0.000001214 0.000000238 -0.000001671 0.000001228 -0.000002954 0.000000931 0.000000559 -0.000003602 0.000001137 0.000000615 0.000001057 -0.000001684 0.000001641 -0.000000323 -0.000045612 0.000055506 -0.000032580 -0.000038340 0.000032950 -0.000019949 -0.000005516 -0.000022150 -0.000016452 0.000028721 0.000086793 -0.000090376 0.000025998 0.000077523 -0.000016371 -0.000001296 0.000009707 -0.000036227 0.000000967 0.000048351 -0.000011055 -0.000011824 -0.000026571 -0.000009605 0.000043680 0.000055213 -0.000044500 0.000008126 0.000050489 -0.000007219 -0.000011903 -0.000003588 0.000014327 -0.000011324 0.000003321 -0.000005303 -0.000004325 0.000012497 -0.000000832 0.000003943 -0.000019331 0.000008334 -0.000019475 0.000015581 -0.000012680 0.000003069 -0.000015201 0.000035549 -0.000027576 0.000015843 0.000006020 -0.000009246 0.000028552 -0.000011374 0.000011185 -0.000021867 0.000019015 -0.000043981 0.000028935 -0.000020896 0.000000378 0.000000136 0.000001032 -0.000000253 -0.000000311 -0.000000657 0.000000438 -0.000001252 0.000000089 0.000000271 0.000000117 -0.000002191 0.000001258 -0.000000098 -0.000000853 -0.000002313 0.000000531 -0.000002015 -0.000001147 0.000000463 -0.000000967 0.000003031 -0.000003898 0.000001549 0.000000186 0.000001614 0.000000378 0.000001595 -0.000000002 0.000000244 -0.000000345 -0.000002152 0.000001619 -0.000001003 -0.000000528 0.000000948 0.000002008 -0.000001193 0.000001692 0.000000317 0.000000966 0.000000298 -0.000000585 0.000001447 -0.000000206 0.000000556 0.000000477 -0.000000021 0.000000485 -0.000000072 0.000000308 0.000001695 -0.000001989 0.000001415 0.000000491 0.000000306 -0.000001078 0.000000532 0.000000173 -0.000000352 -0.000000487 -0.000000067 0.000000664 -0.000001039 0.000000074 -0.000000535 -0.000000353 -0.000000099 -0.000000442 -0.000000105 -0.000000500 0.000000546 -0.000000262 -0.000000574 0.000000370 0.000000245 0.000000627 -0.000000120 0.000000133 0.000000350 -0.000000194 0.000000255 -0.000000102 -0.000000210 0.000000056 -0.000000714 -0.000000211 0.000000094 -0.000000846 0.000000035 0.000001380 0.000001065 -0.000000266 0.000001475 0.000000100 -0.000000160 -0.000001975 0.000002220 -0.000001273 -0.000000205 -0.000000328 -0.000000292 -0.000000966 0.000000563 -0.000000338 0.000000178 0.000001356 -0.000001526 0.000001128 0.000000251 -0.000000323 0.000000744 -0.000000265 -0.000000311 0.000000214 0.000000604 -0.000001359 0.000001019 0.000000347 -0.000000523 -0.000000697 0.000000105 -0.000000327 -0.000000539 0.000000015 -0.000000438 0.000000875 -0.000000978 -0.000000143 0.000000255 0.000000089 -0.000000281 0.000000956 -0.000000737 0.000000225 -0.000000055 0.000000493 -0.000000293 -0.000000093 0.000000208 0.000000390 0.000000536 -0.000000278 0.000000355 0.000000284 -0.000000497 -0.000000259 0.000000302 -0.000000731 0.000000018 -0.000000933 -0.000003449 0.000004380 -0.000003773 -0.000000006 -0.000002562 -0.000000225 0.000000130 -0.000002770 0.000000876 -0.000001742 -0.000000694 0.000000626 -0.000002152 0.000000271 0.000000046 -0.000000902 0.000001005 -0.000000147 -0.000000044 0.000000940 0.000000806 -0.000001239 0.000001842 -0.000000283 0.000001204 -0.000000610 0.000001301 0.000000649 0.000000106 0.000000262 0.000001571 -0.000002064 0.000001298 0.000000063 0.000001907 -0.000000337 0.000001139 0.000001466 -0.000000173 0.000000957 0.000000165 -0.000000591 0.000001453 -0.000000326 0.000000387 -0.000000639 0.000001042 -0.000000280 0.000000155 0.000000545 -0.000000743 0.000001484 -0.000000528 0.000000186 0.000000349 -0.000000738 0.000000753 0.000000021 -0.000000123 -0.000000300 -0.000001088 0.000001211 -0.000001002 -0.000000058 -0.000000445 -0.000000171 -0.000000102 -0.000000321 -0.000000084 -0.000000445 -0.000000137 0.000000586 -0.000000928 0.000000200 0.000000900 -0.000000169 0.000000562 0.000000432 -0.000000041 0.000000109 -0.000000247 0.000000217 0.000000020 -0.000000153 0.000000169 0.000000061 0.000000240 -0.000000164 0.000000156 0.000000886 0.000000082 0.000000306 0.000000637 0.000000088 -0.000002042 0.000000967 -0.000002077 -0.000001026 0.000000026 -0.000000491 0.000000107 -0.000000598 -0.000000092 -0.000000179 0.000001310 -0.000001148 0.000002105 -0.000000006 0.000000034 0.000000428 0.000000325 -0.000000670 0.000000847 -0.000000293 0.000000514 -0.000000285 0.000000162 0.000000672 -0.000000360 -0.000000669 -0.000000077 -0.000000298 -0.000000373 -0.000000153 0.000000239 0.000000459 -0.000000699 0.000000684 -0.000000123 -0.000000006 0.000000143 -0.000000007 -0.000000221 0.000000169 0.000000429 -0.000000011 0.000000171 0.000000314 0.000000004 0.000000790 0.000000142 0.000000134 0.000000642 0.000000019 0.000000368 0.000000145 0.000000141 0.000000115 0.000000195 0.000049716 0.000153935 0.000085096 -0.000170690 0.000041487 0.000072798 -0.000113148 -0.000033189 0.000064334 -0.000069414 0.000082028 -0.000035372 -0.000062099 0.000079506 -0.000061642 -0.000010449 -0.000021943 -0.000031591 -0.000012378 0.000026686 0.000054740 -0.000078046 -0.000022901 0.000180676 -0.000002647 0.000152322 -0.000014410 0.000008959 0.000077842 0.000014237 -0.000022970 0.000059588 0.000021937 -0.000062088 0.000013936 -0.000009336 0.000001574 -0.000010047 0.000003122 0.000036497 -0.000068932 0.000073853 0.000014679 -0.000041929 0.000009043 -0.000012931 0.000007612 -0.000004511 0.000011115 -0.000003671 0.000065146 -0.000020535 0.000003522 0.000079656 -0.000003475 -0.000038212 0.000022617 -0.000020244 -0.000022553 0.000007154 -0.000330828 -0.000011059 0.000017076 0.000072212 -0.000089245 -0.000042073 0.000111349 0.000038428 -0.000150111 0.000105008 -0.000199362 -0.000068524 -0.000034815 0.000065244 0.000176271 0.000055952 0.000015600 0.000014603 -0.000007305 -0.000005763 0.000133505 -0.000029675 -0.000002517 0.000022621 -0.000031832 -0.000058520 0.000029053 0.000026154 -0.000031844 0.000028059 -0.000026610 0.000002843 -0.000034359 0.000021144 0.000005983 -0.000000384 -0.000022224 -0.000016020 0.000050534 0.000003522 0.000025834 0.000023561 0.000012530 0.000011980 -0.000013715 0.000000670 -0.000051327 -0.000017457 0.000075806 -0.000015488 -0.000026773 -0.000015010 -0.000020938 0.000030119 -0.000058321 -0.000004851 0.000000847 -0.000021754 0.000007244 0.000019491 0.341264705 0.003970056 0.058240500 0.000004745 -0.000002984 0.293108943 0.000005964 -0.000007129 0.139991152 0.624254700 0.000001388 -0.000000148 -0.150544802 0.057165878 0.632216540 -0.000004971 0.000003603 -0.085819843 -0.024148886 0.019419362 0.000001499 0.000002279 -0.041513663 -0.241645989 -0.076314484 -0.000003643 0.000003320 -0.006368722 -0.137934222 -0.205388017 0.000000511 -0.000000185 0.007981415 -0.027692678 -0.033864487 0.000000346 0.000000718 -0.009598093 -0.048716399 -0.037130203 -0.000001607 0.000005492 -0.014993730 0.010357617 0.061980603 -0.000003254 0.000006079 -0.007071681 0.008163018 0.005553382 0.000004596 0.000003045 0.007175155 -0.011086084 -0.027771086 0.000002469 -0.000006701 0.007872653 -0.028430140 -0.062897302 -0.000002550 -0.000001038 -0.006154887 -0.003362703 0.036693118 -0.000000602 -0.000000512 -0.019413614 0.026830313 0.078759548 -0.000001818 -0.000003639 0.014594252 0.032666360 0.001241126 -0.000000561 -0.000000104 -0.105625901 -0.028827243 0.068106176 0.000002440 0.000001107 -0.010931602 -0.125062907 -0.028941568 -0.000002053 -0.000001234 0.094302961 0.030435881 -0.301681333 0.000004389 -0.000002456 0.005143245 -0.000110919 -0.003659184 0.000000052 -0.000000196 0.007612090 0.004806789 -0.022001983 0.000000340 -0.000000456 0.007311146 0.004051282 -0.012853069 0.000005270 -0.000003631 0.004528816 -0.004075807 0.002919420 -0.000004394 0.000002295 -0.004513997 -0.001302496 0.001371599 0.000003530 -0.000000787 0.003061208 0.001675545 0.000523229 -0.000007936 -0.000015747 -0.001412841 -0.001245286 0.000129594 -0.000031011 -0.000016983 0.000100694 -0.003708378 0.000238866 0.000039723 -0.000005793 0.000804004 -0.000732420 -0.004470517 0.000003065 0.000001746 0.004931501 -0.004401561 0.002341500 -0.000002398 -0.000001527 -0.004216148 -0.002948702 0.000229327 0.000002122 0.000001387 0.002133697 -0.000089410 0.001880476 0.000002085 0.000000752 0.004855813 0.008659365 0.007853490 -0.000000563 0.000000218 0.000099228 0.005734586 0.003886148 0.000000724 0.000000561 -0.003139089 -0.023229394 -0.011513259 -0.000002258 -0.000006578 -0.000079708 -0.000102875 0.000062932 -0.000001160 -0.000000031 -0.000000563 -0.000007879 0.000008187 0.000003724 0.000004681 0.000010852 -0.000000332 -0.000003749 0.000001462 0.000004823 0.000025343 0.000043479 -0.000027626 0.000000567 0.000001740 0.000007078 0.000018243 -0.000009637 0.000003430 0.000006138 0.000024464 0.000038311 -0.000024933 -0.000006952 -0.000010257 -0.000104234 -0.000152574 0.000090855 0.000000332 -0.000001316 -0.000015307 -0.000025577 0.000016450 0.000001001 -0.000003539 -0.000003186 -0.000004019 0.000006159 0.000002568 0.000001367 0.000033447 0.000057115 -0.000029025 -0.000003475 -0.000000117 -0.000012063 -0.000004703 0.000002660 -0.000003337 -0.000005020 -0.000016198 -0.000019409 0.000012388 -0.000002977 -0.000002292 -0.000057932 -0.000074190 0.000043489 -0.000004047 -0.000000799 -0.000022230 -0.000024924 0.000013089 -0.000002128 -0.000002447 -0.000023256 -0.000041984 0.000024158 -0.000000271 0.000000521 0.000014519 0.000017730 -0.000012044 0.000001498 0.000000443 0.000008478 0.000005089 -0.000006039 -0.000000872 -0.000000728 -0.000018083 -0.000021048 0.000013714 -0.000000137 0.000000846 -0.000004439 -0.000003912 0.000003475 0.000005226 0.000003555 0.000008117 0.000009748 -0.000006558 0.000001025 0.000001043 -0.000000065 -0.000000302 0.000000954 0.000019020 0.000046167 0.000186335 0.000319128 -0.000185253 0.000018683 0.000012977 0.000056879 0.000090096 -0.000046525 -0.000021825 -0.000027778 -0.000021597 -0.000019322 0.000031916 -0.000000440 0.000003321 -0.000003865 0.000000416 -0.000001494 0.000004193 -0.000001820 0.000007786 0.000010162 -0.000003277 -0.000003772 -0.000000180 -0.000005489 -0.000006158 0.000003219 0.000000262 -0.000000785 0.000015785 0.000025944 -0.000014000 0.000002656 -0.000001703 0.000011611 0.000007344 -0.000001684 -0.000000728 0.000001374 0.000010858 0.000025548 -0.000015388 0.000007462 0.000004567 -0.000023971 0.000748266 0.000811830 0.000017852 0.000010426 -0.000386141 0.000833486 0.000911353 -0.000024750 0.000002344 -0.000545318 -0.001318567 0.000467881 -0.000000605 0.000011780 0.000359574 0.000230601 -0.000686124 0.000013910 0.000005545 0.000407292 0.000531088 -0.001924913 -0.000021112 0.000001388 0.000190883 0.001336549 0.000259829 -0.000001565 -0.000013537 -0.000066783 -0.000118249 0.000065049 -0.000013996 -0.000007418 -0.000036930 -0.000059980 0.000027759 0.000007635 0.000008707 -0.000019061 -0.000037970 0.000010796 -0.000009133 -0.000024494 -0.000079821 -0.000137492 0.000083971 -0.000020757 -0.000015964 -0.000036590 -0.000054441 0.000030177 0.000018541 0.000023916 0.000049184 0.000072957 -0.000054614 -0.000000559 -0.000000380 -0.000665849 0.003422205 0.005726157 0.000000885 0.000000529 0.002879029 0.002323336 -0.000064593 0.000000916 -0.000000712 0.004518582 -0.001789833 0.005294621 0.000002742 0.000000306 -0.001186048 0.000193316 0.000017715 0.000000463 0.000001773 -0.000322095 -0.000744515 0.000116586 -0.000002323 -0.000000196 0.000783013 0.000176728 -0.000971294 0.000001298 -0.000001025 0.000126312 -0.000816568 0.000386960 -0.000002301 0.000000752 -0.000670257 0.000790461 0.000425672 -0.000000991 0.000000549 0.000256042 0.000178606 -0.000013292 -0.000000769 0.000000192 -0.000382099 0.000060928 -0.000119313 -0.000000955 0.000001107 -0.000188821 0.000414010 -0.000257273 0.000000195 -0.000000290 0.000013603 -0.000204995 -0.000536844 0.000000418 -0.000000403 0.000033973 0.000039230 0.000047384 0.000000981 -0.000000044 0.000001747 -0.000085978 0.000053874 0.000000239 0.000000084 0.000076661 0.000017279 0.000118227 -0.000000780 0.000000152 -0.000014590 0.000102139 -0.000034122 0.000000110 0.000000020 -0.000078440 0.000080840 0.000028094 0.000000991 -0.000000169 0.000000630 -0.000082504 -0.000029508 -0.000002232 0.000000513 0.000536972 0.000425314 -0.000655331 0.000000542 -0.000001331 0.000122560 0.000057072 -0.000103087 0.000000869 0.000000379 -0.000791382 -0.000445355 -0.000027877 -0.000000725 0.000000805 -0.000311011 0.000044540 0.000125945 -0.000000058 0.000000060 0.000406928 0.000127136 -0.000194378 -0.000000158 -0.000000446 0.000176870 -0.000018216 0.000076156 0.000000937 0.000000013 0.000004664 0.000012594 0.000027364 0.000000422 0.000000478 0.000014821 0.000123444 -0.000013602 -0.000000186 -0.000000430 0.000006231 -0.000075904 0.000032221 -0.000000103 0.000000203 0.000029425 0.000028075 0.000002327 -0.000000758 0.000000254 0.000018358 0.000051754 -0.000003584 0.000000686 -0.000000244 -0.000000862 -0.000030714 0.000041374 0.000001616 -0.000002598 -0.000357381 -0.000087271 0.000233800 0.000002530 -0.000000994 0.000154439 -0.000028186 -0.000027927 0.000002043 -0.000000915 -0.000059426 0.000020197 0.000099970 -0.000000091 -0.000000693 -0.000030215 -0.000031077 0.000057775 -0.000001205 0.000001072 0.000035794 0.000019193 -0.000030993 -0.000001859 -0.000000489 0.000048213 -0.000054595 -0.000021856 -0.000000282 0.000001325 0.000061274 0.000111982 -0.000097215 -0.000002592 -0.000000127 0.000004912 -0.000039421 0.000001932 -0.000000941 0.000000583 0.000016344 0.000072841 -0.000041757 -0.000000668 -0.000000457 -0.000002784 -0.000061551 0.000011293 -0.000000725 -0.000000662 -0.000030581 -0.000026700 0.000040621 -0.000000342 -0.000000382 -0.000003938 0.000001603 0.000004534 0.000000506 -0.000000777 -0.000046821 -0.000073164 0.000036948 0.000000685 -0.000000053 -0.000022259 -0.000015051 0.000002126 0.000000365 -0.000000389 -0.000045341 -0.000102841 0.000040742 -0.000001013 -0.000000052 0.000011126 0.000012670 -0.000010477 -0.000000009 -0.000000100 0.000001942 -0.000003393 -0.000001294 -0.000000258 -0.000000031 -0.000002435 -0.000014698 0.000001324 -0.000001288 0.000000128 -0.000002286 0.000016087 -0.000014616 0.000002890 0.000000648 0.000043926 0.000042472 -0.000032356 0.000000775 0.000000199 0.000012399 0.000017224 -0.000020207 -0.000001612 -0.000000841 -0.000034107 -0.000036930 0.000035361 -0.000000298 0.000000576 0.000009296 0.000014139 -0.000023330 -0.000000504 0.000000017 -0.000001677 0.000001949 0.000004891 0.000000946 -0.000000041 -0.000004257 -0.000010342 0.000005480 -0.000000265 0.000000511 0.000021274 0.000021467 -0.000015496 0.000000034 0.000000060 0.000002834 -0.000006207 -0.000002686 -0.000000582 0.000000043 0.000003547 0.000002836 -0.000003281 -0.000001016 0.000000138 0.000017048 0.000026966 -0.000016599 -0.000000540 0.000000065 0.000003942 0.000000977 -0.000001499 0.000030256 -0.000128029 -0.000017358 -0.000047689 -0.000019986 -0.000049774 0.000129671 -0.000014677 -0.000029097 0.000022599 -0.000013839 0.000135158 -0.000009977 0.000004211 0.000002199 -0.000010603 0.000034008 -0.000004624 -0.000013459 0.000004633 -0.000030017 -0.000039764 0.000000299 -0.000006962 0.000004317 -0.000010177 -0.000002637 -0.000002375 -0.000003076 0.000004814 0.000019599 -0.000021505 0.000010493 0.000023715 -0.000004119 0.000000766 -0.000017607 0.000000264 -0.000003807 -0.000009528 0.000039087 -0.000048149 0.000009523 0.000006225 -0.000019327 0.000003215 -0.000001948 -0.000008307 -0.000022088 -0.000000553 -0.000001966 -0.000026753 0.000009281 0.000026759 -0.000003789 0.000017045 -0.000010813 -0.000000847 -0.000012923 -0.000012089 0.000005798 0.000176621 -0.000005461 -0.000020448 -0.000022472 0.000078849 -0.000166424 -0.000003232 0.000020650 0.000020300 0.000070337 -0.000253692 0.000025354 0.000009239 -0.000023826 -0.000002133 0.000006677 0.000018645 0.000009603 -0.000007308 -0.000033082 0.000043974 -0.000004720 -0.000019471 0.000016236 0.000016426 -0.000032061 0.000014724 0.000018714 -0.000009799 0.000017351 -0.000002178 -0.000014583 0.000029591 -0.000007136 0.000016376 0.000001308 0.000017403 0.000012998 -0.000016781 -0.000005669 0.000021248 -0.000006731 -0.000027405 0.000012763 -0.000012944 0.000035351 -0.000010002 -0.000017973 -0.000013947 -0.000008380 0.000102445 -0.000010816 0.000026765 -0.000005843 0.000014444 -0.000025433 -0.000021184 0.000026775 -0.000000316 0.277707925 0.187382652 0.628072828 -0.170472782 0.042580484 0.697175285 -0.133114611 -0.104859637 0.065800465 0.286506599 -0.124841695 -0.287996664 0.085617625 0.198386249 0.673310386 0.037498086 0.018857276 -0.148623949 -0.146238577 0.102017053 -0.006725509 -0.021313175 0.017054500 -0.106981949 -0.008014841 -0.003233893 0.020010252 0.027858096 -0.028276305 -0.110326862 0.036032012 0.081388628 -0.001715862 0.076801761 -0.046436166 -0.013698933 -0.020102354 -0.004474662 0.021309433 0.017571263 -0.022682887 -0.065330166 -0.009411064 0.034516168 0.037767597 -0.006514545 -0.015037143 -0.004001092 0.009985830 -0.015275416 0.022082035 0.034392110 0.008552786 -0.021335423 -0.015861245 0.020636121 0.041501354 -0.019429924 -0.016966861 -0.021166752 -0.011750097 -0.060972559 -0.037414034 0.023677522 0.025845661 -0.072153361 -0.010599294 0.092012561 -0.001101244 -0.000902236 -0.011761054 -0.057228682 0.015410339 -0.009003605 0.002585750 0.093493310 0.014329030 -0.312820157 0.001618315 -0.002045126 0.003389796 -0.010729523 -0.009840700 -0.048311090 -0.035106029 -0.002148336 -0.012197664 -0.016591090 -0.032882993 -0.229752280 0.001921540 0.009607417 0.011095919 -0.017058891 -0.145216314 0.008151830 0.003196508 0.004102012 -0.012940979 -0.016033152 -0.000265445 0.009262318 -0.002587832 -0.007205906 -0.005864265 0.004395340 -0.001782413 -0.007148252 0.014777889 0.031334723 -0.000931135 -0.000341902 -0.000451853 0.004229471 -0.002098460 -0.000021054 -0.001025064 -0.000111429 -0.002830386 -0.003129549 -0.000553908 0.000066431 0.000640623 0.000360418 -0.003612423 0.004388324 -0.002566968 0.003378420 -0.000743283 0.000173194 -0.001921555 0.001648228 0.000694874 0.000038471 0.000056493 0.003801785 0.000780649 -0.003859136 0.000306317 0.001005150 0.000033025 0.000061354 -0.000012389 -0.000012072 -0.000016107 -0.000000398 0.000001939 -0.000002610 0.000000179 -0.000001272 -0.000002837 -0.000006475 -0.000005003 0.000000674 -0.000001599 -0.000012337 -0.000025204 0.000007030 0.000005860 0.000006605 -0.000004191 -0.000008534 0.000002110 0.000002724 0.000002570 -0.000009516 -0.000019642 0.000003040 0.000004880 0.000005758 0.000050339 0.000092468 -0.000016272 -0.000020191 -0.000025754 0.000006647 0.000014454 -0.000003708 -0.000003345 -0.000003639 -0.000001584 0.000000986 -0.000001217 -0.000000340 0.000000433 -0.000020052 -0.000034810 0.000008645 0.000008638 0.000012107 0.000006444 0.000004520 0.000001871 -0.000000547 0.000000473 0.000008948 0.000014458 -0.000002081 -0.000002889 -0.000003117 0.000032500 0.000050713 -0.000011555 -0.000009084 -0.000013840 0.000007480 0.000017714 0.000001510 -0.000003064 -0.000005012 0.000009951 0.000020485 -0.000000294 -0.000005691 -0.000006288 -0.000005778 -0.000011624 0.000002758 0.000002194 0.000002786 -0.000001555 -0.000001266 0.000000017 -0.000000631 0.000000231 0.000007854 0.000013102 -0.000003020 -0.000002086 -0.000003395 0.000000842 0.000001376 -0.000001039 0.000000142 -0.000000447 -0.000004289 -0.000004103 -0.000000842 0.000000925 0.000000600 -0.000000807 -0.000000769 -0.000000795 0.000000429 0.000000105 -0.000094150 -0.000186519 0.000031746 0.000046763 0.000053815 -0.000034122 -0.000051076 0.000001946 0.000012507 0.000014813 -0.000001410 -0.000003370 0.000000105 0.000000240 0.000006750 0.000003286 0.000001424 -0.000000852 0.000000618 -0.000000361 -0.000006223 -0.000004771 -0.000001560 0.000000712 0.000001593 0.000002677 0.000002332 0.000002302 -0.000000322 0.000000504 -0.000008083 -0.000015506 0.000001909 0.000003301 0.000005178 -0.000007505 -0.000005720 -0.000001326 -0.000000759 0.000000374 -0.000005741 -0.000012662 0.000007794 0.000003719 0.000005605 -0.002115798 -0.001228640 0.000078546 0.002215945 -0.002956357 -0.001162197 -0.001309235 0.002061701 -0.002054731 -0.005064820 0.001467694 0.001737860 0.000146842 0.000836329 0.002778224 -0.000431944 -0.001054496 -0.000915448 -0.000364703 -0.000518909 0.000624773 -0.000901806 0.000225895 -0.000856132 -0.001362700 -0.001016434 -0.001647175 0.001757477 0.004886697 0.003548797 0.000035879 0.000072902 -0.000012028 -0.000018433 -0.000022192 0.000024745 0.000034140 0.000000118 -0.000008358 -0.000010842 0.000017077 0.000031134 -0.000004837 -0.000007305 -0.000012149 0.000037136 0.000077470 -0.000013659 -0.000019680 -0.000021380 0.000021409 0.000027732 0.000001262 -0.000007036 -0.000006707 -0.000017390 -0.000032587 0.000005228 0.000008351 0.000005664 0.000818589 0.000653502 -0.000064209 -0.000336171 -0.000262712 0.000435723 -0.000129708 -0.000167639 -0.000182049 0.000358619 -0.000051537 0.000919832 -0.000563780 -0.000396216 -0.000202242 0.000036473 0.000229552 0.000246671 -0.000026650 0.000090980 -0.000359642 0.000168099 0.000176568 0.000048545 -0.000044521 0.000021902 -0.000370058 -0.000072254 0.000042265 -0.000142610 -0.000069926 0.000254818 -0.000119054 -0.000025267 -0.000125437 -0.000062150 -0.000180305 0.000112105 0.000101442 -0.000031871 0.000074858 -0.000050825 -0.000046093 -0.000037612 0.000070240 0.000020514 -0.000002317 -0.000031207 -0.000015022 0.000001093 0.000028894 -0.000101621 0.000100905 -0.000004614 0.000104314 -0.000036285 -0.000049123 -0.000002235 0.000049887 -0.000024073 -0.000001285 -0.000007988 0.000062450 0.000001331 -0.000022375 0.000017367 0.000043030 -0.000017968 -0.000012718 -0.000011914 -0.000025114 0.000007220 0.000008462 -0.000000269 0.000008301 -0.000018178 -0.000045461 0.000026277 0.000015518 0.000013337 -0.000002942 -0.000018861 0.000012863 0.000006805 0.000008013 0.000008119 0.000025797 0.000001120 -0.000008817 -0.000002934 -0.000052239 -0.000327567 0.000011233 0.000105460 -0.000004375 0.000053218 -0.000032717 -0.000167632 0.000012531 0.000011300 -0.000052935 0.000181638 0.000099627 -0.000035060 0.000038039 -0.000029279 0.000042825 0.000123911 -0.000023625 0.000042804 -0.000131965 -0.000186295 0.000071680 0.000105191 -0.000040121 0.000070812 0.000023780 -0.000125130 -0.000020543 -0.000023723 -0.000004715 -0.000000110 -0.000004765 0.000003345 0.000004256 -0.000023868 -0.000052240 0.000013447 0.000017871 0.000020771 0.000015568 0.000037156 0.000002248 -0.000010740 -0.000009942 -0.000008358 -0.000015941 0.000009508 0.000001412 0.000002974 -0.000010234 -0.000022714 -0.000001202 0.000004920 0.000009076 0.000006882 0.000018690 -0.000002232 -0.000004998 -0.000006380 0.000100207 0.000153635 -0.000058442 -0.000006871 -0.000034081 -0.000036178 -0.000047247 0.000006234 0.000006798 0.000012141 0.000026049 0.000034614 -0.000023952 0.000001779 0.000001855 0.000014377 0.000036199 -0.000011991 -0.000002231 0.000000919 -0.000007186 -0.000008976 0.000008437 0.000002507 0.000004637 -0.000002727 -0.000005845 0.000014014 -0.000004677 -0.000000583 -0.000037777 -0.000076496 0.000018591 0.000017910 0.000010489 0.000017366 0.000018640 0.000000446 -0.000007718 -0.000005048 -0.000015602 -0.000033412 0.000008206 0.000012284 0.000009514 0.000009060 0.000022582 -0.000001180 -0.000010846 -0.000005118 0.000012986 0.000025423 -0.000006916 -0.000002350 -0.000002835 0.000002514 0.000003190 0.000001746 -0.000000490 0.000001456 0.000020543 0.000041702 -0.000004085 -0.000010199 -0.000008414 0.000005822 0.000009430 -0.000004427 -0.000001592 -0.000002848 0.000022168 0.000049972 -0.000009843 -0.000014368 -0.000014949 -0.000001794 -0.000007440 0.000003417 0.000000866 0.000002556 0.000002498 0.000002141 0.000000524 -0.000001658 -0.000000141 0.000002145 0.000003162 -0.000000578 -0.000001762 -0.000001714 -0.000000565 -0.000009299 0.000003014 0.000001746 0.000000462 -0.000020958 -0.000031099 0.000002602 0.000006682 0.000005240 -0.000007227 -0.000011291 0.000002862 0.000002033 0.000001073 0.000017586 0.000028639 -0.000003336 -0.000005343 -0.000003844 -0.000001945 -0.000008594 0.000005743 0.000001011 0.000001956 0.000004921 0.000005821 0.000000506 -0.000001192 0.000000640 0.000002417 0.000006594 -0.000001990 -0.000001755 -0.000001702 -0.000007267 -0.000013787 0.000003612 0.000002558 0.000004061 -0.000001100 -0.000001007 0.000000932 -0.000000217 -0.000000107 -0.000000676 -0.000002262 0.000001211 0.000000155 0.000000953 -0.000006729 -0.000015892 0.000004161 0.000003587 0.000004024 -0.000001348 -0.000002870 0.000000769 0.000000428 0.000000646 0.000034932 0.000012259 0.000018211 -0.000006417 -0.000021808 0.000007246 -0.000004751 0.000008218 0.000000038 0.000008398 -0.000003395 -0.000032496 0.000025528 0.000004633 0.000045570 0.000005269 0.000013513 0.000002316 -0.000004322 -0.000010268 -0.000000012 0.000009172 -0.000002677 -0.000000528 -0.000006274 0.000001195 -0.000001270 -0.000000593 0.000000747 0.000002956 -0.000013575 -0.000014644 -0.000003231 0.000000323 0.000015281 0.000005789 0.000005761 0.000004601 0.000003877 -0.000009434 0.000003463 0.000003957 0.000001130 0.000008549 -0.000017768 0.000017268 0.000003811 0.000013002 0.000002626 0.000000654 -0.000010561 -0.000016013 -0.000004902 0.000006027 0.000019941 0.000015488 0.000012029 0.000009966 0.000011799 -0.000020560 0.000007829 0.000028382 -0.000008505 -0.000001744 -0.000034133 -0.000017130 0.000009482 -0.000020599 -0.000005373 -0.000003982 0.000008011 -0.000008593 0.000004686 0.000011335 -0.000023901 -0.000006158 -0.000002814 -0.000006518 -0.000005292 -0.000002691 0.000003880 0.000004369 0.000001914 -0.000006843 0.000003573 -0.000008439 -0.000010518 -0.000000594 0.000006673 -0.000000292 0.000007407 -0.000017445 0.000012204 0.000004324 0.000016771 -0.000011111 -0.000002287 0.000004601 0.000005250 -0.000006201 0.000008900 0.000016324 -0.000007854 -0.000005801 -0.000012851 -0.000007231 0.000025075 -0.000005550 0.000005788 -0.000000690 -0.000010557 -0.000002016 -0.000001399 -0.000001628 0.000012260 -0.000041397 -0.000001217 0.000006521 0.000009960 0.000036124 0.678006279 0.102281194 0.268191968 0.012021031 0.150494582 0.553241896 -0.325132901 -0.134075461 0.123167585 0.724997247 -0.008983037 -0.077764556 -0.018040478 0.017124404 0.290256956 -0.063364406 -0.039719938 -0.232231284 -0.092569039 0.188759645 -0.039401133 -0.008926670 -0.150353105 -0.228484947 -0.181045208 0.025172498 0.005750413 -0.030780073 -0.035462449 -0.130553639 0.030619111 -0.012654986 -0.050560099 -0.036503732 -0.125184957 -0.039896936 -0.010642045 0.014048633 0.057818492 0.038253948 0.013965600 0.004665073 -0.004749854 0.001364012 -0.000332959 0.025403738 -0.004453113 -0.002501572 -0.000121037 -0.000165480 -0.003647441 0.001908111 0.000637384 0.001817377 -0.000547428 -0.017440775 0.006839649 0.009252715 0.005620547 0.003117329 -0.145052467 -0.000794112 0.004948417 0.001730104 -0.001899964 -0.173175526 -0.004315485 -0.021654978 -0.011694165 0.003690371 0.014511760 -0.102374510 -0.025707148 0.018088259 -0.005306370 0.023785185 -0.023372584 -0.134487109 0.001987732 -0.019486485 -0.003591770 0.015663883 0.003094159 -0.110975800 -0.009693730 0.000012618 0.005445774 -0.000841384 -0.002249498 -0.084156861 -0.002903490 0.008995083 0.007111551 -0.021395511 -0.013445402 0.000216781 0.007032613 0.002742992 -0.012616224 0.105038067 -0.000049676 0.004568060 -0.004028217 0.003571013 0.002806101 0.000860582 -0.003900230 -0.001440826 0.001880748 -0.001273425 -0.000538635 0.002840284 0.001123502 0.000875399 0.002041184 0.000028494 0.000047541 0.000086013 -0.000026127 -0.000014395 -0.000000736 0.000000444 0.000003260 0.000001380 -0.000000046 -0.000004917 -0.000002902 -0.000006824 0.000000942 -0.000003049 -0.000014913 -0.000021705 -0.000038769 0.000011424 0.000008992 -0.000005753 -0.000008854 -0.000014473 0.000004337 0.000003280 -0.000011203 -0.000017709 -0.000031761 0.000006750 0.000004600 0.000050899 0.000075050 0.000128512 -0.000043530 -0.000022197 0.000007759 0.000011575 0.000021541 -0.000004811 -0.000003854 -0.000000745 -0.000000952 0.000003040 0.000005205 0.000001159 -0.000020986 -0.000030158 -0.000047406 0.000020880 0.000011355 0.000002488 0.000002454 0.000003829 -0.000002569 0.000001874 0.000010388 0.000012607 0.000019898 -0.000008834 -0.000002987 0.000026012 0.000036119 0.000061081 -0.000026625 -0.000009777 0.000008502 0.000012932 0.000022602 -0.000007999 -0.000001498 0.000011459 0.000020125 0.000033756 -0.000009212 -0.000005131 -0.000005866 -0.000009676 -0.000017486 0.000006246 0.000003855 0.000002500 0.000000403 -0.000002456 -0.000002308 -0.000002118 0.000005956 0.000009567 0.000017411 -0.000004883 -0.000002719 -0.000000779 0.000000966 0.000003179 -0.000000210 -0.000000594 -0.000003569 -0.000004608 -0.000008955 0.000001127 -0.000000625 -0.000001431 -0.000001305 -0.000000587 0.000001795 0.000000142 -0.000117620 -0.000168436 -0.000277620 0.000096685 0.000057007 -0.000036084 -0.000048126 -0.000075039 0.000029878 0.000010820 0.000002804 0.000012970 0.000034855 0.000006988 -0.000004490 -0.000000542 -0.000001008 -0.000001876 -0.000001210 0.000000877 -0.000003374 -0.000004228 -0.000005776 0.000002731 -0.000000839 0.000002325 0.000002733 0.000005108 -0.000001157 0.000000676 -0.000006648 -0.000011460 -0.000019567 0.000007830 0.000003112 -0.000000842 -0.000000546 -0.000002363 0.000001996 -0.000003327 -0.000008164 -0.000013235 -0.000020932 0.000006411 0.000007392 -0.001706225 0.012331261 -0.014540145 0.026853194 -0.000143453 -0.003715031 -0.015198155 -0.003374748 0.046796826 -0.001229464 0.004083155 0.017207930 0.029981493 -0.040759911 -0.001858258 -0.001761185 -0.003664225 -0.037866433 -0.021975849 -0.000730385 -0.004837285 -0.037608173 -0.036502368 -0.031346319 -0.003532037 -0.007597357 -0.011375376 -0.015894414 0.009060561 0.001595226 0.000045599 0.000064137 0.000102057 -0.000040830 -0.000022436 0.000025067 0.000032763 0.000047897 -0.000022115 -0.000007152 0.000017103 0.000019467 0.000023854 -0.000019685 -0.000005825 0.000049437 0.000072898 0.000122867 -0.000038791 -0.000025765 0.000022685 0.000029101 0.000047684 -0.000015085 -0.000003818 -0.000023293 -0.000037746 -0.000072171 0.000011474 0.000011218 0.000020736 0.000080724 0.000025506 -0.000315091 0.000003671 -0.000389936 -0.000083083 -0.000078726 0.000117247 -0.000215404 0.000487954 0.000354187 0.000493787 -0.000363232 -0.000454664 -0.000182014 -0.000091185 -0.000121607 0.000100166 -0.000118437 0.000080359 -0.000036571 -0.000055407 0.000042203 -0.000042434 0.000090828 -0.000005577 -0.000013750 -0.000096956 0.000174687 0.000199702 0.000148266 0.000232742 -0.000113227 -0.000018538 -0.000027892 -0.000101441 -0.000205583 0.000060666 0.000081731 -0.000104304 -0.000032775 -0.000049975 0.000043579 -0.000061979 0.000007717 0.000001077 0.000002257 -0.000002848 0.000071511 -0.000160593 -0.000109976 -0.000176488 0.000092759 -0.000033954 0.000053673 0.000003098 -0.000003637 -0.000013027 0.000021455 -0.000013484 0.000005571 0.000012143 -0.000009195 0.000001973 0.000019621 0.000023351 0.000041013 -0.000019534 -0.000008092 -0.000010569 -0.000004140 -0.000005022 0.000007442 -0.000009021 -0.000019079 -0.000027012 -0.000046673 0.000021306 0.000006882 -0.000011019 -0.000012392 -0.000021151 0.000012013 0.000005872 0.000006678 0.000015642 0.000030660 -0.000010070 -0.000003539 -0.000012179 -0.000077165 -0.000150682 0.000019894 0.000088181 0.000058383 0.000062685 0.000113089 -0.000040776 0.000047118 -0.000037593 0.000002453 0.000012137 0.000034842 -0.000034769 -0.000089361 -0.000064055 -0.000105243 0.000059099 -0.000050176 0.000026867 -0.000054720 -0.000115802 0.000021818 0.000010163 0.000062356 0.000063792 0.000107061 -0.000056904 0.000028439 -0.000002286 -0.000001405 -0.000000244 0.000004246 -0.000003561 -0.000020310 -0.000030439 -0.000054472 0.000028600 0.000000400 0.000003730 0.000015514 0.000031585 -0.000012141 -0.000000779 -0.000010789 -0.000008984 -0.000013971 0.000008358 -0.000001778 -0.000008870 -0.000014394 -0.000025266 0.000011524 0.000002571 0.000003374 0.000013890 0.000027930 -0.000006025 -0.000009064 0.000071506 0.000096588 0.000179791 -0.000055989 -0.000031986 -0.000022235 -0.000012232 -0.000029753 0.000014988 -0.000011126 0.000014275 0.000028642 0.000052104 -0.000004384 -0.000025903 0.000007705 0.000017443 0.000031312 -0.000010027 -0.000006787 -0.000008366 -0.000010476 -0.000019050 0.000003995 0.000007944 -0.000003724 0.000000694 -0.000000329 -0.000004060 0.000002152 -0.000024209 -0.000044122 -0.000080151 0.000029142 0.000011929 0.000006896 0.000009690 0.000020649 -0.000010826 0.000005855 -0.000006267 -0.000022585 -0.000041416 0.000011510 0.000006513 0.000006166 0.000014247 0.000025909 -0.000011137 -0.000000741 0.000008314 0.000014333 0.000026731 -0.000007371 -0.000003945 0.000004789 0.000003941 0.000005588 -0.000003920 -0.000002431 0.000015198 0.000028054 0.000049922 -0.000019401 -0.000007938 0.000005054 0.000008435 0.000015249 -0.000005431 -0.000003691 0.000008922 0.000027090 0.000050091 -0.000016854 -0.000001969 -0.000002031 -0.000006042 -0.000010825 0.000003379 0.000004318 0.000002269 0.000002006 0.000003051 -0.000002517 0.000000563 -0.000000455 0.000002228 0.000005552 -0.000000268 0.000000591 -0.000002329 -0.000006250 -0.000009444 0.000003922 0.000003970 -0.000010645 -0.000015945 -0.000030238 0.000012942 -0.000001165 -0.000002687 -0.000005863 -0.000012317 0.000003436 0.000000650 0.000010276 0.000016270 0.000030132 -0.000011072 -0.000001556 -0.000002330 -0.000006445 -0.000010924 0.000001760 0.000005509 0.000003126 0.000001111 0.000001035 -0.000003440 0.000002583 0.000003258 0.000005519 0.000009075 -0.000004186 -0.000002560 -0.000005976 -0.000010662 -0.000019050 0.000006500 0.000004090 -0.000001658 -0.000000562 0.000000099 0.000001161 0.000000333 -0.000001084 -0.000002382 -0.000004068 0.000001388 0.000001754 -0.000005779 -0.000011494 -0.000020525 0.000007565 0.000004661 -0.000002570 -0.000002929 -0.000003887 0.000002620 0.000001603 0.000011205 0.000037075 -0.000009256 -0.000045497 0.000005429 0.000023526 0.000017614 0.000013301 -0.000001298 -0.000006936 0.000010181 0.000020572 -0.000010230 0.000003709 -0.000001357 0.000006065 0.000008255 0.000017876 -0.000005259 -0.000000382 0.000003383 0.000005106 0.000012213 -0.000003117 -0.000003603 0.000005316 0.000002303 0.000005398 0.000001174 -0.000001565 -0.000008604 -0.000007521 -0.000016822 0.000012419 -0.000002148 0.000000726 0.000003879 -0.000001673 -0.000008702 0.000000118 -0.000006066 -0.000002954 -0.000015458 -0.000014003 0.000000957 0.000009658 0.000016668 -0.000001800 -0.000011809 -0.000004106 -0.000008395 -0.000016292 -0.000017015 0.000013978 0.000001632 0.000007069 0.000006485 -0.000003449 -0.000014807 0.000003144 -0.000004501 0.000010131 -0.000022071 -0.000013916 0.000007953 -0.000014721 -0.000024779 0.000031411 0.000021278 -0.000006520 -0.000013498 0.000002546 -0.000031360 -0.000000928 0.000010948 -0.000004276 -0.000001826 -0.000010481 0.000003861 -0.000001652 0.000016521 0.000010223 0.000022847 -0.000003932 -0.000005485 -0.000006893 -0.000010026 -0.000015538 0.000001006 -0.000001073 -0.000012584 -0.000018387 -0.000019056 0.000014899 0.000014234 -0.000003655 -0.000005784 -0.000017518 -0.000005514 -0.000002239 0.000013470 0.000019449 0.000023054 -0.000010736 -0.000004385 -0.000000781 0.000000901 -0.000016889 -0.000008786 0.000013407 -0.000017105 -0.000020945 -0.000011766 0.000009412 0.000009143 -0.000003736 -0.000015845 -0.000012598 0.000017074 0.000012880 0.631792923 0.053703737 0.711859284 -0.099210282 0.066663189 0.268647702 -0.293150684 0.086615598 0.185845121 0.687000064 0.021133003 -0.150630948 -0.142230146 0.092568779 0.653610170 0.000565504 -0.000502100 0.004677713 -0.002641273 0.001653330 -0.001375123 -0.000078509 -0.002470080 -0.002838840 -0.003551606 -0.000136448 0.000460482 0.000472513 -0.003789207 0.000120746 -0.002311933 0.003862808 -0.001068490 -0.000019504 0.000212635 0.001858183 0.000513696 0.000040636 -0.000096022 0.000975571 0.001321013 -0.003232023 0.000034559 0.000780660 -0.000190225 -0.011370024 -0.006674427 0.008177076 -0.000122763 -0.000402585 -0.038068357 0.003595487 0.000132566 0.002834223 -0.009771545 -0.002604276 0.019962189 -0.000940512 -0.009146496 -0.001116526 -0.013337534 0.106187758 0.000849210 0.000597770 0.012593119 -0.055341152 0.014632348 -0.009290702 0.003665697 0.024182462 0.013746751 -0.310091020 0.001761358 -0.001592425 -0.001622506 -0.012180987 -0.009338098 -0.046113678 -0.025333609 -0.009445537 -0.014340415 -0.017029189 -0.027392710 -0.232644925 -0.146090314 0.010215124 0.010389324 -0.010337769 -0.143716524 -0.171429358 -0.000039566 -0.000004776 0.000036719 0.000043785 -0.000038490 -0.000004114 -0.000000667 0.000002610 0.000009077 0.000000741 0.000000726 0.000000471 -0.000005266 0.000007405 0.000007578 0.000018970 0.000000487 -0.000013216 -0.000013378 0.000019752 0.000007138 0.000000651 -0.000004810 -0.000005292 0.000007838 0.000017182 0.000003797 -0.000013724 -0.000017262 0.000014334 -0.000053975 -0.000003904 0.000046787 0.000043937 -0.000065957 -0.000010752 -0.000001095 0.000007765 0.000008463 -0.000011545 -0.000005079 -0.000002678 0.000003969 0.000005634 -0.000000904 0.000017665 -0.000000787 -0.000012710 -0.000013243 0.000023082 0.000000561 -0.000000094 0.000005370 -0.000001127 -0.000002217 -0.000006819 0.000000796 0.000006317 0.000000681 -0.000011952 -0.000020376 0.000002331 0.000022290 0.000015980 -0.000031599 -0.000009066 -0.000001404 0.000013228 0.000008412 -0.000008974 -0.000014946 -0.000003324 0.000011115 0.000015535 -0.000019443 0.000007127 -0.000000760 -0.000006369 -0.000006203 0.000009425 0.000003732 0.000001737 -0.000006480 -0.000010683 -0.000002258 -0.000007867 -0.000000760 0.000007767 0.000008397 -0.000008271 -0.000002473 0.000000214 0.000002688 0.000005342 -0.000000389 0.000005074 0.000000009 -0.000006397 -0.000002550 0.000004769 -0.000000974 -0.000000326 0.000000526 0.000002618 0.000000637 0.000120896 0.000010498 -0.000086876 -0.000083491 0.000144732 0.000030723 0.000002135 -0.000027906 -0.000017278 0.000038351 -0.000030847 0.000000649 0.000029371 0.000025467 -0.000020143 0.000002792 0.000001648 0.000000291 -0.000001833 0.000001107 0.000001626 -0.000000036 -0.000004519 -0.000000535 0.000002910 -0.000002772 -0.000000728 0.000003903 0.000001258 -0.000003272 0.000007506 0.000000625 -0.000006881 -0.000008480 0.000008830 -0.000001295 -0.000000748 -0.000005791 -0.000000584 0.000000763 0.000009798 -0.000000721 -0.000003210 -0.000008346 0.000011586 -0.001877447 0.002437544 -0.000546862 0.000652589 -0.000222256 -0.003710001 0.001671227 0.000039674 0.000966958 0.001243716 -0.008769014 -0.004673111 0.001296938 0.002135407 -0.000299460 -0.001584837 0.005745009 -0.000962978 -0.001671601 -0.000485630 0.001624963 0.005765161 -0.000329666 -0.003401098 0.001697734 0.000681958 0.000769876 -0.000082575 0.000218205 0.001411875 -0.000040703 -0.000003527 0.000027248 0.000026677 -0.000052765 -0.000017821 -0.000001223 0.000017252 0.000008725 -0.000024077 -0.000000867 -0.000000964 -0.000001620 -0.000002760 -0.000011366 -0.000056779 -0.000005269 0.000040388 0.000040778 -0.000064779 -0.000022158 -0.000000802 0.000022254 0.000010043 -0.000025352 0.000041895 0.000002301 -0.000035222 -0.000031590 0.000039031 0.000370641 0.000457973 -0.000964230 -0.001631270 0.000532845 0.000198742 -0.000150174 -0.000551481 0.000030049 0.000212993 0.000063390 0.000253601 -0.000306179 -0.000175564 -0.000141282 0.000011729 -0.000067211 0.000275636 -0.000349101 -0.000232167 -0.000057007 -0.000021154 0.000306168 -0.000053588 -0.000248607 0.000099047 0.000040953 -0.000336585 0.000233213 0.000227360 -0.000123135 0.000046323 0.000089917 0.000186315 -0.000165135 0.000080262 0.000132098 -0.000183178 -0.000433094 0.000097684 0.000024587 -0.000049720 -0.000017063 -0.000055295 0.000054314 -0.000029974 0.000019134 0.000019235 0.000045574 0.000017437 0.000076575 -0.000059303 0.000031663 -0.000184033 0.000044248 0.000002040 -0.000031043 0.000025934 0.000126902 -0.000001592 0.000004692 -0.000009761 -0.000012670 -0.000004947 0.000010426 -0.000012999 -0.000004547 0.000017831 0.000033285 -0.000014773 0.000004803 0.000008089 -0.000016017 -0.000031922 -0.000011034 0.000017632 0.000004284 -0.000019014 -0.000041249 0.000013563 0.000005030 0.000008495 -0.000010018 -0.000038565 0.000004111 -0.000013305 -0.000012110 0.000021811 0.000046180 -0.000011009 0.000128043 0.000001933 -0.000205622 0.000015649 0.000197796 -0.000033947 0.000025059 -0.000090901 0.000175805 0.000049913 -0.000067584 -0.000026384 0.000301031 -0.000083997 -0.000183443 0.000021523 -0.000025276 0.000116296 -0.000197336 -0.000057190 0.000078850 0.000025500 -0.000136653 -0.000091702 0.000049369 -0.000028105 0.000021716 -0.000064661 0.000138202 0.000035531 -0.000001908 0.000001561 -0.000005652 -0.000006217 -0.000001130 0.000019461 0.000010049 -0.000032035 -0.000058841 0.000005202 -0.000013465 -0.000010095 0.000019163 0.000035347 -0.000004284 0.000003135 -0.000000195 -0.000010939 -0.000008321 0.000005755 0.000008153 0.000005769 -0.000015549 -0.000018378 0.000008526 -0.000015339 -0.000002643 0.000001428 0.000021057 -0.000009897 -0.000082712 -0.000025855 0.000069633 0.000109749 -0.000058502 0.000011247 0.000007980 -0.000046952 -0.000014224 0.000002521 -0.000032980 -0.000006570 0.000012143 0.000032943 -0.000032366 -0.000013066 -0.000001158 0.000011490 0.000015641 -0.000014317 0.000012890 0.000003343 -0.000005365 -0.000007689 0.000007634 0.000005572 0.000002354 0.000001424 -0.000006151 -0.000003612 0.000033163 0.000003999 -0.000039362 -0.000045924 0.000035428 -0.000005674 -0.000000410 0.000020024 0.000018531 -0.000004967 0.000023536 0.000012118 -0.000018135 -0.000052482 0.000006247 -0.000009230 -0.000001508 0.000014194 0.000018869 -0.000012776 -0.000011239 -0.000003888 0.000010617 0.000016893 -0.000010967 0.000002482 0.000005654 0.000002576 -0.000018543 -0.000013098 -0.000016717 -0.000000450 0.000023556 0.000020194 -0.000029036 -0.000005658 0.000001115 0.000005676 0.000005140 -0.000008872 -0.000026955 -0.000016257 0.000022158 0.000069875 -0.000002907 0.000005994 0.000001997 -0.000001058 -0.000011525 0.000003108 0.000000093 0.000002073 0.000003319 -0.000004331 -0.000003107 -0.000004707 -0.000002396 0.000004312 0.000012285 0.000000349 0.000003146 0.000000111 0.000000042 -0.000003162 0.000005691 0.000010459 0.000002408 -0.000023357 -0.000015871 0.000010633 0.000006003 0.000001788 -0.000007767 -0.000011409 0.000003727 -0.000010884 -0.000001873 0.000018937 0.000012864 -0.000013172 0.000007069 0.000002746 0.000000057 -0.000010454 0.000003672 0.000002998 0.000001075 0.000002218 -0.000006420 -0.000000588 -0.000003323 0.000000514 0.000002263 0.000003062 -0.000004783 0.000008687 0.000001126 -0.000007842 -0.000011067 0.000007883 -0.000001175 -0.000000703 0.000000970 0.000003687 0.000000462 0.000002234 0.000000300 -0.000000392 -0.000003137 0.000001300 0.000008889 0.000001191 -0.000007311 -0.000013065 0.000008802 0.000000269 -0.000001210 -0.000000233 0.000003166 0.000003537 0.000012979 0.000000133 -0.000019659 0.000000294 0.000021571 -0.000024259 -0.000000304 0.000015889 0.000000431 -0.000020516 -0.000024243 -0.000028669 0.000004243 0.000005464 -0.000019736 -0.000002531 -0.000003393 0.000004766 0.000003274 -0.000003275 -0.000002315 -0.000002141 0.000001419 0.000003480 -0.000002936 -0.000005337 -0.000001419 0.000004059 0.000000695 -0.000005515 -0.000002036 -0.000005907 -0.000005534 -0.000000172 -0.000000808 0.000009326 -0.000001556 -0.000005578 0.000000635 0.000008198 0.000021563 0.000005698 -0.000016213 -0.000000796 0.000021124 -0.000000596 -0.000002424 -0.000000429 0.000001539 -0.000001863 0.000001895 -0.000000543 -0.000001768 -0.000002358 0.000000193 0.000017963 0.000006720 -0.000005512 -0.000001947 0.000014527 0.000027892 0.000018320 -0.000017370 -0.000004303 0.000027497 -0.000011756 -0.000001709 0.000018914 0.000007064 -0.000018545 0.000026574 0.000013480 -0.000024895 -0.000003218 0.000032626 0.000003969 0.000001963 -0.000011464 -0.000000869 0.000009937 -0.000019703 -0.000006626 0.000011988 0.000003714 -0.000015781 0.000006474 -0.000000194 -0.000008555 0.000000073 0.000008851 0.000007652 -0.000003882 0.000011052 -0.000008059 0.000001873 0.000012013 -0.000002171 -0.000017719 0.000002465 0.000016806 -0.000012880 0.000002425 0.000004611 0.000006546 -0.000007701 0.000017574 0.000009891 -0.000012848 -0.000007064 0.000012979 0.000011241 -0.000000787 0.000006965 -0.000011381 0.000001581 -0.000005457 -0.000010139 0.000010460 -0.000001164 -0.000013616 0.066686270 0.017153386 0.055663026 -0.102441458 -0.015065620 0.326946647 -0.003196516 0.001959313 -0.001235462 0.041813357 0.001970514 0.000222178 0.000523724 0.041279634 0.239476985 -0.001443109 0.000316832 0.000224846 0.018679876 0.155173548 0.000654592 -0.000410747 -0.000153117 -0.003198623 0.001402970 0.000186966 0.000827440 -0.000591817 0.001508123 -0.001056703 0.000731256 0.001216249 -0.000062380 -0.000493697 -0.000114335 -0.000559634 0.000212511 -0.000155490 0.000570864 -0.000273405 0.000234678 -0.000085904 0.000120696 0.000433452 0.000298947 -0.000166146 0.000115836 -0.000113802 0.000510678 0.000146987 0.000061719 0.000430410 0.000342690 -0.000593626 0.000276139 0.000000804 0.000291203 0.000208193 0.000201986 -0.000152661 -0.000194797 -0.001155634 -0.000661351 -0.000228150 0.000066529 -0.000011166 -0.000015456 -0.000012178 -0.000005367 0.000005453 -0.000000372 -0.000000721 -0.000001121 -0.000000611 0.000000722 0.000002250 -0.000000027 0.000000411 0.000002509 -0.000001155 0.000003196 0.000006800 0.000004602 0.000002337 -0.000002165 0.000000632 0.000002659 0.000001479 0.000000895 -0.000000668 0.000002197 0.000006304 0.000004356 0.000002937 -0.000002177 -0.000018813 -0.000023726 -0.000016645 -0.000012946 0.000011215 -0.000002084 -0.000004077 -0.000002706 -0.000001387 0.000001496 0.000001465 -0.000001103 -0.000000592 0.000000956 -0.000000232 0.000007858 0.000008942 0.000006027 0.000005432 -0.000004681 -0.000003845 0.000000742 -0.000000816 -0.000002709 0.000001732 -0.000003614 -0.000002331 -0.000002568 -0.000002601 0.000001818 -0.000015427 -0.000009631 -0.000008861 -0.000007357 0.000007348 -0.000004616 -0.000004064 -0.000003041 -0.000004388 0.000003046 -0.000002395 -0.000007650 -0.000003651 -0.000003425 0.000002254 0.000001736 0.000002737 0.000002117 0.000000497 -0.000000618 0.000001025 0.000000239 0.000001331 0.000000661 -0.000000467 -0.000003417 -0.000003026 -0.000002692 -0.000001763 0.000001892 -0.000000178 -0.000000406 -0.000000689 0.000000271 -0.000000093 0.000002140 0.000000499 0.000001345 0.000002988 -0.000001636 0.000000265 -0.000000039 -0.000000091 0.000000454 -0.000000047 0.000027713 0.000051735 0.000032833 0.000025911 -0.000018938 0.000014585 0.000012012 0.000009530 0.000015567 -0.000009883 0.000007682 0.000001067 -0.000004174 -0.000000071 -0.000003054 -0.000002988 0.000000854 -0.000000195 -0.000000895 0.000001198 0.000004306 0.000000374 0.000001006 0.000004140 -0.000002825 -0.000001490 -0.000000125 -0.000000521 -0.000002162 0.000000982 0.000003333 0.000004635 0.000002623 0.000001951 -0.000001916 0.000006479 -0.000001217 0.000000824 0.000003338 -0.000002774 0.000000986 0.000004544 0.000002781 0.000000604 -0.000001346 -0.000465861 -0.000120055 0.000054179 0.000430985 -0.000142752 -0.000260936 -0.000579871 0.000188090 0.000135780 0.000225510 0.000157873 0.000396701 -0.000153096 -0.001363351 0.000016994 -0.000167767 -0.000008430 0.000095868 -0.001417821 -0.001881580 -0.000194320 -0.000133025 0.000155518 -0.001914678 -0.001724752 -0.000053135 -0.000170397 0.000056652 0.000983632 0.002200891 -0.000010955 -0.000020305 -0.000011758 -0.000009116 0.000006829 -0.000011677 -0.000007674 -0.000006199 -0.000012436 0.000007949 -0.000009651 -0.000008083 -0.000002997 -0.000004777 0.000005158 -0.000008604 -0.000022196 -0.000014277 -0.000009435 0.000006470 -0.000009404 -0.000005640 -0.000006210 -0.000012143 0.000006959 0.000001726 0.000008929 0.000008795 0.000006127 -0.000002774 -0.000031178 -0.000146928 -0.000316414 -0.000007735 -0.000020508 0.000405869 -0.000302705 -0.000001710 -0.000009042 0.000026874 0.000125698 0.000328902 0.000256679 0.000064544 0.000006975 0.000191351 -0.000183891 -0.000087493 -0.000011925 -0.000004303 0.000005095 0.000077687 0.000084538 0.000018978 -0.000013339 -0.000144369 0.000128571 0.000027968 0.000000734 -0.000002898 -0.000076273 0.000057206 0.000045036 0.000024235 0.000007697 -0.000096247 0.000085490 -0.000000946 -0.000019637 -0.000022446 0.000047671 -0.000095209 -0.000022771 -0.000011731 0.000003001 -0.000005504 0.000024773 0.000016634 -0.000001784 -0.000000601 0.000099059 -0.000104663 -0.000042998 -0.000007984 -0.000004824 -0.000040887 0.000016607 -0.000011235 0.000002592 0.000004836 -0.000034071 -0.000003561 -0.000008278 -0.000007477 -0.000003529 0.000002064 -0.000005201 -0.000007480 0.000003635 0.000002580 0.000011604 0.000000269 0.000016738 0.000002255 -0.000002185 0.000005163 0.000010457 0.000006169 -0.000001941 -0.000003437 0.000003073 0.000005775 0.000002133 -0.000002504 -0.000001930 0.000003163 -0.000006338 -0.000002399 0.000001838 0.000001401 -0.000083323 0.000058948 0.000003149 -0.000009775 -0.000003534 -0.000017602 0.000026317 0.000033745 0.000006330 0.000014446 0.000067244 -0.000054491 -0.000025085 -0.000001112 -0.000002014 0.000068056 -0.000060202 -0.000027978 -0.000005830 -0.000009047 -0.000077488 0.000066766 0.000017572 -0.000003950 -0.000010208 -0.000032320 0.000024193 0.000018222 0.000004613 0.000009892 0.000004324 0.000001216 0.000001161 0.000001164 -0.000000479 0.000012439 0.000009600 0.000010664 0.000001349 -0.000003274 -0.000002809 -0.000008968 -0.000010679 -0.000000421 0.000001385 0.000003083 0.000002077 0.000002542 -0.000000138 -0.000001839 0.000007879 0.000006878 0.000006909 0.000001468 -0.000001388 -0.000001652 -0.000005066 -0.000002228 0.000000256 0.000000598 -0.000035158 -0.000040792 -0.000025444 -0.000003108 0.000015108 0.000016419 0.000001309 0.000000952 0.000004346 -0.000006477 -0.000002245 -0.000007578 -0.000004414 0.000002938 0.000002508 -0.000002453 -0.000005173 -0.000008040 -0.000000521 0.000001635 -0.000000079 0.000007569 0.000002462 -0.000000371 -0.000000698 -0.000002213 -0.000000536 -0.000002184 -0.000002775 -0.000000197 0.000006447 0.000015390 0.000011391 0.000001110 -0.000004657 -0.000009761 0.000001748 -0.000002629 -0.000004257 0.000002594 0.000001049 0.000011246 0.000005495 -0.000000891 -0.000001254 -0.000000663 -0.000004791 -0.000001672 -0.000000490 0.000001190 -0.000005034 -0.000005531 -0.000004443 -0.000001390 0.000002569 -0.000001261 -0.000000470 -0.000000279 -0.000000770 0.000000602 -0.000005054 -0.000010950 -0.000007060 -0.000000682 0.000002742 -0.000000953 -0.000002788 -0.000002382 0.000000510 0.000000629 -0.000003752 -0.000012427 -0.000008004 0.000000302 0.000002499 -0.000000662 0.000003083 0.000001513 -0.000001473 0.000000404 -0.000001192 0.000000526 -0.000000080 -0.000000953 0.000000231 -0.000000813 -0.000000608 -0.000000468 -0.000000564 0.000000393 -0.000001250 0.000002479 0.000001957 -0.000001001 0.000000398 0.000008786 0.000004854 0.000004878 0.000003917 -0.000003743 0.000002376 0.000001864 0.000001887 0.000000804 -0.000001075 -0.000007387 -0.000004820 -0.000004833 -0.000003387 0.000003181 -0.000001407 0.000004488 0.000002247 -0.000001040 -0.000000393 -0.000002474 0.000000810 -0.000000199 -0.000001175 0.000000711 -0.000000190 -0.000001565 -0.000000937 0.000000408 -0.000000162 0.000002108 0.000003960 0.000002657 0.000000383 -0.000000894 0.000000350 -0.000000175 -0.000000263 0.000000006 -0.000000157 -0.000000077 0.000000892 0.000000567 -0.000000338 0.000000219 0.000001142 0.000004341 0.000002663 -0.000000594 -0.000000368 0.000000264 0.000000768 0.000000329 -0.000000223 0.000000018 -0.000032626 -0.000009622 -0.000002162 -0.000038150 0.000025833 0.000006789 0.000000005 -0.000002816 -0.000002200 0.000007599 0.000016594 0.000012325 0.000001115 -0.000000303 -0.000012536 -0.000003883 -0.000002672 -0.000001576 -0.000009781 0.000001992 0.000000027 -0.000002504 -0.000000894 -0.000001196 -0.000001017 0.000000712 0.000001428 -0.000000750 -0.000000187 0.000000970 0.000011394 0.000004384 0.000001969 0.000010904 -0.000011883 -0.000007033 -0.000001253 0.000000625 -0.000005808 0.000004519 -0.000008324 -0.000003702 0.000002260 -0.000000551 0.000006306 -0.000004414 -0.000000294 -0.000001239 -0.000001959 0.000008484 0.000008083 0.000006867 0.000002708 0.000013954 -0.000010989 -0.000013589 -0.000002807 0.000000501 -0.000004822 0.000015031 -0.000021617 -0.000007481 0.000001112 -0.000009625 0.000013142 0.000013136 0.000001709 -0.000000812 0.000015574 -0.000012737 -0.000005324 -0.000004702 0.000002436 0.000006101 0.000001710 0.000004927 -0.000000915 0.000000916 0.000005486 -0.000002759 0.000002607 -0.000000200 -0.000002828 -0.000006789 0.000001092 0.000003431 0.000001142 0.000002216 0.000003876 -0.000002409 0.000001733 0.000006308 0.000001633 0.000002749 -0.000003618 -0.000000589 -0.000000383 0.000002247 -0.000000864 0.000000695 -0.000003476 -0.000005032 -0.000003459 -0.000005099 0.000003762 -0.000015533 0.000000762 0.000002153 -0.000005810 0.000007700 -0.000001103 0.000005000 0.000000889 0.000004222 -0.000004199 0.000008934 0.000008338 0.000002096 -0.000002397 -0.000006852 0.177411523 -0.003140615 0.401837102 -0.002875762 0.232709249 0.615022339 -0.002830355 0.054780134 0.067706945 1.067009430 -0.000065787 -0.002715367 0.002341172 -0.001079710 0.076367377 -0.001168495 0.001635786 0.000022984 -0.002535735 0.017437909 -0.000531757 -0.000109426 0.002076599 -0.004110062 -0.115277172 -0.000230710 0.000730055 -0.000464035 -0.000467380 -0.003295885 0.000042726 0.000199029 -0.000118810 -0.001259043 0.001671546 -0.000054706 0.000265538 0.000525146 0.000667559 -0.001670229 -0.000003654 -0.000115582 -0.000157584 0.000055963 -0.000005814 -0.000000093 -0.000001501 0.000002950 0.000003585 -0.000000732 -0.000000106 0.000019765 0.000015197 0.000000195 0.000005507 0.000001228 0.000056352 0.000080115 -0.000030944 0.000002729 0.000000125 0.000022152 0.000031757 -0.000010211 0.000001051 0.000000149 0.000047949 0.000059986 -0.000022164 0.000004239 -0.000007779 -0.000196564 -0.000263941 0.000039085 -0.000012529 -0.000000525 -0.000031080 -0.000043804 0.000016855 -0.000002314 0.000001737 -0.000000518 -0.000003887 0.000019509 -0.000001138 0.000004980 0.000075048 0.000104142 0.000000209 0.000002906 -0.000001089 -0.000011446 -0.000002434 -0.000012599 -0.000003125 -0.000001436 -0.000036022 -0.000043279 0.000001337 -0.000003311 -0.000007305 -0.000092777 -0.000123608 -0.000009212 -0.000005248 -0.000001605 -0.000038519 -0.000038758 -0.000003681 -0.000004559 -0.000000755 -0.000052301 -0.000068502 0.000012824 -0.000003877 0.000000738 0.000022448 0.000031495 -0.000014898 0.000000772 -0.000000110 -0.000000428 -0.000011301 -0.000006289 0.000001881 -0.000001133 -0.000024277 -0.000031749 0.000005957 -0.000001614 -0.000000105 -0.000000275 0.000002334 0.000008033 0.000000032 0.000000643 0.000019493 0.000009241 -0.000001262 0.000004847 0.000000309 0.000004474 0.000004326 0.000005471 0.000000425 0.000011858 0.000443421 0.000608712 -0.000116817 0.000025271 0.000007026 0.000140949 0.000154685 0.000019348 0.000014397 0.000008128 -0.000047463 0.000000288 0.000138772 -0.000015367 -0.000001648 0.000003020 0.000006824 -0.000013735 0.000000006 0.000001776 0.000016689 0.000008321 0.000019723 0.000003511 -0.000000201 -0.000012053 -0.000005122 -0.000001058 -0.000002718 0.000001796 0.000027231 0.000038408 -0.000001747 0.000000918 0.000002168 0.000006100 -0.000004063 0.000021302 0.000002637 0.000001291 0.000029158 0.000047863 -0.000011134 0.000000063 0.000356386 -0.103685256 -0.039057761 0.054071651 -0.000490000 0.000192356 -0.039395050 -0.149818925 0.107403687 -0.000859770 0.001033132 0.049415829 0.103344368 -0.605594986 -0.000139855 0.000192711 -0.181245589 -0.146574465 -0.130331032 0.000030602 0.001440115 -0.148082317 -0.296845013 -0.192140367 -0.000608466 0.002366700 -0.128455315 -0.185047141 -0.346007440 -0.000392448 -0.000005836 -0.000164144 -0.000239335 0.000024415 -0.000006102 -0.000005885 -0.000096644 -0.000103809 -0.000036319 -0.000009597 -0.000006970 -0.000045054 -0.000091576 -0.000064571 0.000003298 -0.000002471 -0.000191692 -0.000260779 0.000082662 -0.000011554 -0.000003921 -0.000096464 -0.000082511 -0.000004265 -0.000015099 -0.000002330 0.000111667 0.000108284 -0.000100955 0.000015756 0.000002987 -0.000037604 -0.000136864 0.000028030 -0.000047446 -0.000012526 0.000210015 0.000034148 0.000000102 0.000054307 -0.000004556 -0.000336643 -0.000502089 0.000169581 0.000019822 0.000005492 0.000233178 0.000160377 -0.000031108 -0.000007065 0.000013444 0.000119751 0.000195798 -0.000050882 -0.000004973 0.000005288 -0.000085792 -0.000012333 -0.000012746 0.000007129 -0.000005253 -0.000232126 -0.000282377 0.000070750 0.000000513 0.000012154 0.000152510 0.000316725 -0.000094285 -0.000022269 -0.000003648 0.000073339 0.000054676 -0.000027653 0.000001113 0.000000475 -0.000009091 0.000008869 -0.000012073 -0.000007206 0.000003498 0.000212647 0.000229044 -0.000070868 -0.000001962 -0.000005185 -0.000044287 -0.000034218 -0.000012527 0.000005395 0.000003186 -0.000023132 -0.000034418 0.000022718 0.000000015 -0.000001796 -0.000035224 -0.000063669 0.000022145 0.000002671 0.000004847 0.000027683 0.000031708 0.000012307 0.000002330 0.000003425 0.000048686 0.000078324 -0.000014038 -0.000000817 0.000001799 0.000020687 0.000033122 -0.000004500 -0.000001798 -0.000000385 -0.000026793 -0.000051736 0.000025447 0.000002984 0.000000319 0.000053373 0.000164792 -0.000068441 0.000006422 -0.000010293 -0.000150502 -0.000186331 0.000055083 0.000008679 0.000000053 0.000038693 -0.000000100 -0.000004507 -0.000008432 0.000006688 0.000154119 0.000168430 -0.000049084 -0.000008807 0.000006914 0.000054214 0.000149267 -0.000049551 0.000001068 -0.000007943 -0.000126954 -0.000160851 0.000035087 0.000004959 0.000000488 0.000003221 -0.000000833 0.000006833 0.000001107 0.000003149 0.000060752 0.000086745 -0.000024375 -0.000000127 -0.000000539 -0.000030030 -0.000045332 0.000023168 -0.000000136 0.000001949 0.000021354 0.000029700 -0.000003294 -0.000000142 0.000001632 0.000033702 0.000052896 -0.000013003 -0.000000299 0.000000002 -0.000022958 -0.000039904 0.000020753 0.000000741 -0.000010438 -0.000199694 -0.000305926 0.000107840 0.000003452 0.000004447 0.000031545 0.000027750 0.000011452 0.000006881 -0.000001683 -0.000048256 -0.000084700 0.000046828 0.000004350 -0.000001828 -0.000042667 -0.000056020 0.000014141 -0.000000560 0.000000995 0.000021779 0.000041111 -0.000021312 -0.000000942 -0.000000164 -0.000009336 -0.000001342 -0.000011386 -0.000002848 0.000004007 0.000092417 0.000137086 -0.000045931 0.000000603 -0.000002155 -0.000028681 -0.000021960 -0.000003829 -0.000004553 0.000000421 0.000032736 0.000057694 -0.000039017 -0.000004144 -0.000000566 -0.000025816 -0.000039231 0.000014218 0.000000059 -0.000001275 -0.000032477 -0.000043550 0.000011221 -0.000000785 -0.000000716 -0.000015543 -0.000020114 -0.000006219 -0.000002445 -0.000002020 -0.000057656 -0.000088932 0.000027993 -0.000000032 -0.000000715 -0.000016054 -0.000028327 0.000011513 0.000001016 -0.000001102 -0.000039472 -0.000065959 0.000038858 0.000004210 -0.000000069 0.000005467 0.000015782 -0.000017792 -0.000003224 -0.000000480 -0.000009679 -0.000011073 -0.000003277 -0.000002029 0.000000091 -0.000002606 -0.000002638 0.000006657 0.000000355 -0.000000089 0.000011752 0.000022180 -0.000008706 -0.000001261 0.000002979 0.000041241 0.000043435 0.000001816 0.000004476 0.000000653 0.000013216 0.000013912 -0.000007360 0.000000623 -0.000002196 -0.000043587 -0.000050924 0.000003575 -0.000003968 0.000000215 0.000008529 0.000017961 -0.000012212 -0.000002302 -0.000000871 -0.000009151 -0.000007529 -0.000012036 -0.000002556 -0.000000247 -0.000011215 -0.000020120 0.000008285 0.000000546 0.000000804 0.000022159 0.000033318 -0.000014332 -0.000000190 0.000000394 0.000002312 0.000003161 0.000005079 0.000000273 0.000000006 0.000003805 0.000007783 -0.000006899 -0.000000747 0.000000469 0.000020698 0.000036085 -0.000019707 -0.000001622 0.000000321 0.000007362 0.000012872 0.000000486 0.000000138 -0.000032340 0.000030472 0.000030431 -0.000323015 0.000018468 0.000006421 -0.000033375 0.000045593 0.000146533 -0.000022553 0.000021153 -0.000032843 0.000004894 -0.000067747 -0.000001885 -0.000003092 -0.000061734 -0.000082623 -0.000103844 -0.000001570 -0.000000472 -0.000030230 -0.000058183 -0.000031172 0.000001910 0.000004500 -0.000021891 -0.000008750 0.000020016 -0.000004361 0.000006059 0.000035902 0.000029686 0.000037732 0.000005790 -0.000003236 -0.000005724 -0.000032204 -0.000110622 0.000007208 -0.000006297 0.000051317 0.000008519 -0.000072131 0.000016571 0.000007686 -0.000018633 -0.000002300 -0.000032668 -0.000003540 0.000009480 0.000039927 0.000046397 0.000096088 0.000001788 -0.000000402 0.000004775 -0.000021860 -0.000071485 0.000004519 -0.000021468 0.000074452 0.000040436 -0.000074816 0.000012801 0.000017432 -0.000098209 -0.000077967 0.000038705 -0.000008381 -0.000013264 0.000147288 0.000072895 0.000042247 0.000018013 -0.000000739 0.000027177 0.000003176 0.000022345 0.000006116 0.000003783 -0.000088857 -0.000061740 -0.000011844 -0.000012089 0.000001977 0.000031706 0.000017828 -0.000006923 0.000008382 0.000003810 0.000024736 0.000061825 0.000001878 -0.000005040 -0.000001940 0.000027356 -0.000001748 -0.000067872 0.000012276 -0.000002891 -0.000049799 -0.000055893 0.000007923 -0.000005040 -0.000012050 0.000069135 0.000057938 -0.000032934 0.000006357 -0.000000133 0.000003582 0.000032493 -0.000002860 -0.000003470 0.000009488 -0.000000028 0.000044453 -0.000006609 -0.000006565 0.051766321 -0.015811606 0.323672389 0.001937992 -0.001487547 0.036336322 0.000455306 0.000557700 0.030989749 0.243710364 0.000295399 0.000101175 0.007363070 0.153395269 0.176242877 0.000005165 -0.000002222 -0.000011520 -0.000010620 0.000022579 0.000003201 -0.000000257 -0.000003060 0.000001864 0.000002390 0.000001554 0.000002924 0.000003048 0.000003048 0.000004942 -0.000000497 0.000000115 -0.000000179 0.000006763 -0.000012797 0.000000017 0.000000179 -0.000000108 0.000002490 -0.000004623 -0.000002704 0.000001676 0.000004275 0.000002479 -0.000008509 0.000001312 -0.000005070 -0.000008108 -0.000018198 0.000034672 0.000000858 -0.000000546 -0.000001187 -0.000003165 0.000006765 0.000002090 0.000000298 -0.000002578 -0.000000064 0.000000809 0.000001387 0.000001296 -0.000001337 0.000006856 -0.000015776 0.000000267 -0.000002115 -0.000003932 -0.000000608 -0.000003069 -0.000001458 -0.000001927 -0.000000505 -0.000004124 0.000003482 -0.000000652 -0.000002857 -0.000005521 -0.000009248 0.000015232 0.000001785 -0.000002753 -0.000005443 -0.000001727 0.000002799 0.000000912 -0.000002025 -0.000002371 -0.000002931 0.000008917 -0.000000455 0.000000254 0.000001458 0.000003724 -0.000004678 -0.000004348 0.000001316 0.000007782 -0.000003026 0.000000931 0.000001331 -0.000000487 -0.000002223 -0.000002501 0.000005077 0.000001893 -0.000000095 -0.000002332 0.000000201 0.000001272 -0.000001817 0.000002655 0.000004058 0.000000299 -0.000000326 0.000001119 0.000000675 -0.000000763 0.000000289 0.000000696 0.000004665 0.000009088 0.000000117 0.000041616 -0.000079189 0.000000210 0.000007414 0.000005202 0.000008962 -0.000016574 0.000012956 -0.000007770 -0.000016792 -0.000002786 0.000003387 0.000000037 -0.000000287 -0.000000970 0.000000153 -0.000000710 -0.000000837 0.000001919 0.000002556 -0.000000052 -0.000000001 0.000000667 -0.000001532 -0.000002078 -0.000000050 -0.000000238 -0.000000463 0.000000537 0.000001196 0.000001975 -0.000005141 -0.000001186 0.000001716 0.000004829 -0.000000498 0.000002477 -0.000000147 -0.000000489 -0.000002186 0.000002760 -0.000011102 -0.001135509 0.000524478 -0.000056537 -0.000104240 -0.000022270 -0.001698874 0.002107975 0.000051639 -0.000067267 -0.000062372 0.001962062 0.002351937 0.000091851 0.000211531 -0.000017427 0.000675685 0.000029647 -0.000475309 -0.000353677 0.000131058 0.000933898 -0.000212790 -0.000101016 -0.000568584 0.000281003 0.001640745 0.000609301 -0.000150179 0.000059268 -0.000063062 -0.000005154 -0.000002066 0.000004214 -0.000016300 0.000029804 -0.000000996 -0.000005024 -0.000002622 -0.000005576 0.000010282 -0.000007663 0.000001782 0.000008128 -0.000005117 0.000009258 -0.000000291 -0.000003848 -0.000001348 -0.000018286 0.000034891 0.000002474 -0.000008142 -0.000007993 -0.000004572 0.000007619 -0.000008081 0.000007079 0.000011993 0.000008508 -0.000016425 -0.000094186 0.000019894 0.000056350 0.000037794 -0.000123541 -0.000010898 0.000015282 0.000215037 -0.000028192 -0.000075868 -0.000035132 0.000008597 0.000100602 -0.000118416 0.000107056 -0.000021084 0.000007674 0.000127811 0.000005060 -0.000031183 -0.000004436 -0.000003090 -0.000029064 -0.000002639 -0.000032808 0.000016136 -0.000002987 -0.000105321 0.000025777 -0.000003249 0.000007590 -0.000003845 -0.000073262 -0.000023159 0.000063957 -0.000027881 0.000004550 -0.000037414 0.000025675 -0.000018260 -0.000003246 0.000004628 0.000042520 0.000010649 -0.000042688 0.000004176 -0.000003401 -0.000036396 0.000026156 -0.000024182 -0.000008568 0.000003891 0.000078424 0.000010342 -0.000048967 0.000009405 -0.000001253 -0.000019819 -0.000014258 0.000037793 -0.000000155 0.000000116 0.000001813 0.000004018 -0.000012533 0.000001963 -0.000000182 0.000002020 -0.000006743 0.000008535 -0.000002808 0.000001028 0.000009774 -0.000004999 0.000001406 -0.000002335 0.000000478 0.000003926 0.000002894 -0.000006572 -0.000002392 0.000000458 0.000000844 0.000001903 -0.000002467 0.000002869 -0.000000292 0.000002605 -0.000003329 0.000004392 0.000002000 0.000000621 -0.000051700 0.000011274 -0.000011781 0.000011236 -0.000002215 -0.000056390 -0.000010762 0.000047413 -0.000002558 -0.000001313 0.000022049 0.000017255 0.000000757 -0.000011204 0.000002133 0.000059580 0.000011359 -0.000038999 -0.000008525 0.000003082 -0.000017692 -0.000016471 0.000027356 0.000008040 -0.000002396 -0.000034961 -0.000004258 0.000016533 -0.000001006 0.000000859 0.000003164 -0.000001837 0.000004239 -0.000004976 0.000001778 0.000008315 -0.000001287 -0.000000491 0.000003985 -0.000000838 -0.000003227 0.000001470 -0.000001081 -0.000000979 0.000000342 0.000004622 0.000000878 -0.000007045 -0.000001311 0.000000198 0.000002490 0.000001674 -0.000005088 0.000000939 0.000000167 0.000003269 -0.000003796 0.000003859 0.000012570 -0.000001718 -0.000007325 -0.000023447 0.000049083 -0.000004664 0.000004757 0.000029409 0.000000775 0.000014399 0.000002044 0.000001603 0.000015055 -0.000009528 0.000032914 0.000000969 -0.000000852 -0.000003336 0.000001589 0.000007360 -0.000000818 -0.000000921 -0.000003440 -0.000000907 -0.000012074 -0.000000490 -0.000001581 -0.000006140 -0.000001852 -0.000002208 -0.000004381 0.000001437 0.000017515 0.000006124 -0.000016796 0.000003895 -0.000002901 -0.000021363 0.000003472 -0.000002128 -0.000005382 -0.000000671 -0.000007180 -0.000002996 -0.000010788 0.000001185 -0.000000859 -0.000004760 -0.000003637 0.000001951 0.000002431 -0.000000953 -0.000001458 -0.000003577 0.000005845 -0.000002940 -0.000001042 -0.000005914 -0.000007601 0.000001349 0.000001220 -0.000000791 -0.000007922 -0.000012208 0.000012873 0.000000346 0.000000408 -0.000002354 -0.000001703 0.000007802 0.000007238 -0.000000059 0.000008237 0.000002932 0.000006481 -0.000000798 -0.000001170 -0.000005071 0.000002229 -0.000006147 -0.000000829 -0.000000598 -0.000005667 0.000000513 -0.000001518 0.000002059 0.000000135 -0.000000842 0.000001785 0.000000458 0.000000867 -0.000000449 -0.000003402 0.000002127 -0.000004261 -0.000003155 0.000003188 0.000015983 0.000000597 0.000001488 -0.000002351 0.000000585 0.000004792 -0.000000072 -0.000001925 0.000002125 -0.000002350 -0.000011229 -0.000002016 0.000001462 -0.000001388 -0.000000813 -0.000006990 0.000001059 -0.000008858 -0.000001578 -0.000001512 -0.000004685 -0.000000040 -0.000005511 -0.000000540 0.000000313 -0.000000269 -0.000001656 0.000002709 -0.000001264 -0.000000030 0.000001581 0.000002375 -0.000005851 0.000001047 0.000000360 -0.000000687 0.000000671 0.000000704 -0.000000167 -0.000000444 -0.000001194 0.000000601 -0.000002201 -0.000000846 -0.000000606 0.000000490 0.000003253 -0.000006433 0.000001301 0.000000129 0.000000001 0.000001770 -0.000001097 -0.000001847 0.000007114 0.000006534 0.000003317 0.000004082 0.000006085 -0.000008397 -0.000005164 -0.000004527 0.000005762 -0.000001573 -0.000004265 -0.000001856 0.000001764 -0.000004604 -0.000001784 -0.000001337 0.000000118 0.000000386 0.000001699 -0.000002315 0.000000590 0.000002072 -0.000000666 0.000002615 0.000000316 -0.000002046 -0.000001029 -0.000000544 0.000000790 -0.000001591 0.000002541 0.000002798 0.000000526 -0.000002469 -0.000001981 0.000001899 0.000001506 0.000001835 -0.000000836 -0.000002566 0.000007370 0.000005337 0.000001723 -0.000000454 0.000000590 -0.000002296 -0.000001220 -0.000000419 0.000001708 -0.000000060 0.000000682 -0.000000311 0.000000363 -0.000003791 -0.000000314 0.000001993 0.000000605 0.000000855 0.000000633 -0.000001335 0.000006846 0.000004934 0.000001946 0.000002156 0.000001556 -0.000006536 -0.000005904 -0.000001558 -0.000001032 0.000001030 0.000006683 0.000001777 0.000000973 -0.000002840 -0.000001446 0.000004270 0.000005132 -0.000000058 0.000001477 -0.000000513 -0.000003947 -0.000000446 -0.000001560 0.000004392 -0.000002133 0.000005380 0.000004788 0.000001439 -0.000000989 0.000002673 -0.000004569 -0.000010171 0.000003391 -0.000012803 -0.000003459 0.000008308 0.000005254 0.000002591 -0.000003129 -0.000000247 -0.000002680 0.000000363 -0.000001940 0.000007496 0.000000988 0.000002809 0.000000280 0.000002272 -0.000001874 0.000000176 -0.000001563 -0.000004236 0.000002833 -0.000008702 0.000001867 -0.000003955 -0.000006489 0.000004274 -0.000011696 0.719247010 0.073418433 0.216947485 0.010792987 0.189406992 0.669452302 -0.366868733 -0.056839542 -0.044103756 0.732410287 -0.033741109 -0.080552607 -0.027307935 0.066568015 0.223642485 0.027800849 -0.017067346 -0.127306461 -0.062770465 0.188977150 -0.021956761 -0.011503985 -0.025580795 -0.140338932 -0.047993667 -0.033714888 0.004612805 0.003014922 -0.025941692 -0.106982012 -0.081164060 -0.003550771 0.029452972 -0.029491437 -0.090143008 -0.061181598 0.000019119 0.025372520 0.062791874 0.020000065 0.003701581 -0.006459696 0.000014868 0.001368585 0.004645589 0.031636756 0.001142322 -0.015161401 -0.015875519 -0.023330250 0.069941153 0.005245775 -0.012994666 -0.048367529 -0.018406930 0.020041044 0.005357625 -0.023610545 -0.017040022 -0.012389790 0.031866384 -0.014058171 -0.047940609 -0.027871100 -0.009930680 -0.105815661 -0.040885089 -0.099942804 -0.007799717 -0.010683588 -0.038657486 -0.072619485 -0.086712466 -0.002093051 0.002315607 -0.099359862 -0.088177115 -0.264954277 0.002848664 0.000310596 -0.010393608 0.006216435 0.024127386 -0.157062138 0.032294463 -0.003300930 0.006269348 0.004543129 0.031019282 -0.053515343 -0.003869621 0.000072625 0.006950483 0.135932878 -0.052260809 0.009912061 -0.002486915 -0.003330828 -0.030044489 -0.010592143 0.000572084 0.006592472 -0.006247087 -0.016493990 -0.005192752 -0.004090155 -0.005503033 -0.005853266 -0.026579366 0.000122666 -0.000979957 0.000216370 0.000668289 -0.002178374 -0.000031292 -0.000221566 -0.000752650 0.000549920 0.000810628 0.004764717 0.000542224 0.000596311 0.000323524 0.003846133 -0.001781961 -0.000686742 -0.001498360 -0.002566459 -0.000469514 -0.000266391 -0.002212252 0.005218769 -0.002820585 0.000175023 -0.000582224 -0.002610756 -0.003476590 -0.002360439 -0.001166731 0.000102587 0.000049926 0.000002366 -0.000011034 -0.000024563 -0.000009432 0.000051987 -0.000002115 -0.000003672 -0.000028107 -0.000011090 -0.000055046 -0.000003691 0.000003574 0.000029304 0.000010487 0.000063054 0.000000709 -0.000014132 -0.000030525 -0.000012150 0.000069190 -0.000003979 -0.000006255 -0.000035502 -0.000014582 0.000010585 -0.000001863 -0.000004172 -0.000003286 -0.000001941 -0.003234847 -0.001001321 -0.001260314 -0.004771651 0.001095978 -0.001169727 -0.001222077 0.000860001 -0.000819258 0.003377488 -0.001601938 0.000172487 0.001030836 -0.000422921 -0.000146351 -0.000616199 0.000840151 0.000941229 -0.002358933 -0.000464706 0.000086045 -0.000342120 0.001159625 -0.002236370 -0.000152816 0.002442841 0.000483963 0.001109809 -0.007543433 -0.004409740 0.000005533 -0.000003314 -0.000001636 0.000007607 0.000001980 0.000045060 0.000000747 0.000004758 -0.000005663 -0.000001651 -0.000000602 0.000003760 0.000010774 -0.000000274 0.000003940 0.000022948 -0.000000987 0.000006504 -0.000009016 0.000002654 0.000186091 0.000019377 0.000005854 -0.000057839 -0.000005497 -0.000077976 -0.000016316 -0.000013928 0.000013303 0.000003049 -0.000034505 -0.000001089 0.000004670 0.000007857 0.000005113 0.000007831 0.000003028 -0.000002331 -0.000001582 -0.000000513 0.000019639 0.000000636 -0.000001190 -0.000003263 -0.000002625 0.000003204 0.000000403 -0.000004139 0.000000294 -0.000000678 0.000034556 0.000000991 -0.000002802 -0.000008415 -0.000004595 -0.000013110 -0.000001070 0.000002662 0.000001058 0.000002210 -0.000011313 -0.000000493 0.000000531 0.000004636 0.000001256 0.000013672 0.000000015 0.000000101 -0.000006004 -0.000002475 0.000001536 0.000000877 0.000000693 -0.000000180 0.000000058 -0.000016815 0.000000531 0.000000132 0.000006848 0.000002728 0.000005803 -0.000000133 -0.000000500 -0.000001941 -0.000001323 0.000005564 0.000000069 0.000000121 -0.000002706 -0.000001038 -0.000005705 0.000001979 -0.000003552 -0.000000663 -0.000001536 -0.000085066 -0.000002654 0.000004178 0.000021949 0.000015553 0.000055380 -0.000000149 -0.000002061 -0.000020473 -0.000013023 0.000038850 -0.000000892 -0.000002109 -0.000010131 -0.000005843 0.000008804 -0.000002211 -0.000003675 -0.000006596 -0.000007306 -0.000012377 -0.000000132 0.000003767 0.000003141 0.000003532 0.000015661 0.000000834 -0.000001034 -0.000006594 -0.000002025 0.000030385 -0.000000389 -0.000006774 -0.000009945 -0.000006415 -0.000065875 0.000002188 0.000005073 0.000026029 0.000011714 -0.000001542 0.000000728 -0.000001290 0.000001157 -0.000001054 -0.000009056 0.000000203 -0.000000384 0.000004312 0.000001345 -0.000002856 -0.000000034 0.000000611 0.000001341 0.000001313 0.000032172 -0.000372942 -0.000297609 0.000091008 0.000063225 0.000082022 0.000140823 -0.000210307 0.000240911 -0.000010048 0.000233906 -0.000043068 -0.000064198 0.000168807 -0.000050707 0.000160714 0.000726250 -0.000077296 0.000398378 -0.000197246 0.000651050 0.000274058 -0.000220680 -0.000375348 -0.000075698 -0.001228092 0.000196448 -0.000364890 0.000429219 0.000467985 -0.000064346 0.000088409 0.000183636 -0.000053771 0.000021617 -0.000300237 0.000048736 -0.000001902 0.000009931 0.000086030 -0.000042700 0.000078177 0.000083620 -0.000057442 0.000008380 -0.000244676 -0.000069661 -0.000091052 0.000026101 0.000096952 0.000036836 -0.000002270 -0.000115223 0.000114866 -0.000039618 -0.000070098 -0.000030456 -0.000081618 0.000056683 0.000020113 -0.000063717 0.000002032 0.000002379 0.000032162 0.000014504 0.000021984 -0.000002517 0.000006248 -0.000007609 -0.000003239 -0.000028484 0.000002305 0.000010269 0.000008563 0.000005126 -0.000034392 0.000000924 0.000002992 0.000016118 0.000004468 -0.000011009 -0.000001119 -0.000007209 0.000002502 0.000001022 -0.000011896 0.000002409 0.000002990 0.000005661 0.000002794 -0.000075855 -0.000083075 -0.000035961 -0.000108363 0.000088903 0.000342254 -0.000186598 0.000092299 -0.000220621 -0.000061422 -0.000000008 -0.000066583 -0.000043405 -0.000060986 0.000022086 -0.000127774 0.000092232 -0.000071768 0.000177212 -0.000008603 0.000095464 -0.000021586 0.000063334 -0.000084908 -0.000026570 0.000069594 0.000002647 -0.000012298 0.000006254 -0.000042001 0.000040487 0.000002490 -0.000012025 -0.000028781 -0.000006972 -0.000042602 0.000000640 -0.000053778 -0.000004181 0.000012612 0.000001475 0.000025063 0.000020716 -0.000002388 0.000000952 -0.000050050 0.000006894 -0.000013506 0.000024394 0.000012600 -0.000045346 0.000000043 -0.000010077 0.000017195 0.000010962 -0.000010739 0.000002062 0.000011251 0.000000748 0.000004867 -0.000027806 -0.000001007 0.000012391 0.000015813 0.000009164 0.000018635 -0.000000698 -0.000019937 -0.000017739 -0.000001324 -0.000011136 0.000002053 0.000005298 0.000010598 0.000000497 -0.000002722 0.000000071 0.000000933 0.000001610 0.000001246 0.000000558 -0.000001420 -0.000001532 -0.000002478 0.000000510 0.000004062 0.000000442 -0.000001781 -0.000003378 0.000000545 0.000000166 0.000000447 0.000007673 0.000001775 0.000000894 -0.000002215 0.000001090 0.000004773 0.000003840 0.000000760 0.000003121 -0.000001210 0.000002927 0.000000664 -0.000001359 0.000000274 -0.000000511 -0.000004415 -0.000000466 -0.000000700 0.000003190 0.000001072 0.000003004 -0.000000404 -0.000000355 -0.000002166 -0.000000332 0.000000991 0.000002093 0.000000257 0.000011408 -0.000023212 -0.000022723 -0.000022306 -0.000003920 0.000032784 -0.000015284 -0.000033532 -0.000037428 0.000014959 -0.000030507 -0.000009580 0.000004330 0.000014592 0.000001454 -0.000022918 0.000014094 0.000048067 0.000018147 0.000010332 0.000004106 0.000008828 0.000014845 -0.000002428 0.000004555 0.000047579 0.000005546 -0.000005747 -0.000020470 -0.000013316 -0.000065365 0.000010590 0.000018172 0.000055492 0.000025311 0.000005279 0.000007040 0.000014294 0.000015178 -0.000025215 0.000018653 -0.000023597 -0.000029390 -0.000040612 0.000032367 0.000009734 -0.000005245 -0.000021381 -0.000007331 -0.000004256 -0.000062308 0.000001358 0.000041275 0.000046536 0.000028650 -0.000010375 -0.000003189 -0.000003933 0.000016045 0.000006584 0.680771383 -0.090692945 0.582190819 -0.099486974 0.061796810 0.223497512 -0.293385583 -0.040444369 0.197293993 0.730670590 0.033700459 -0.174601289 0.007973533 0.067685906 0.718638889 -0.017548162 0.030756925 -0.084385773 -0.065858147 0.082689262 -0.048832345 0.127865736 -0.056964009 -0.277366774 0.005704822 -0.033974994 -0.042113351 0.018557198 0.070594801 -0.367598615 -0.010592318 -0.001494303 0.015700443 0.023667763 -0.027346053 -0.021328287 0.015452972 0.013592376 0.039021198 0.025651652 -0.026943781 -0.004553820 -0.001208773 0.001423847 -0.000875187 -0.004209049 -0.001639097 0.006819901 -0.000914713 0.001146755 0.003571831 0.000489514 -0.001583065 0.001811710 0.000584220 0.137003808 0.011556248 -0.002259894 -0.009276828 -0.000710333 -0.051711912 0.007905100 0.003083023 -0.008011633 -0.002247997 -0.239452795 0.016215918 -0.004105815 -0.014525823 -0.003209898 -0.020862185 -0.142420323 -0.009577908 0.001500635 -0.040095070 0.000448975 -0.012694993 -0.089130468 -0.012560402 0.003788730 0.011301976 0.001959738 -0.011367715 -0.108992972 0.020458075 0.003358370 0.012276021 0.006410810 0.013918040 -0.106894514 -0.001504307 -0.003701168 0.002153603 -0.005639876 -0.046951690 -0.001329315 -0.011467096 -0.008256999 -0.014427027 -0.099948513 -0.000797328 -0.004155014 -0.001798597 -0.001595111 -0.012683793 0.000447753 -0.001774883 0.006074006 -0.002803446 -0.004728640 -0.000123241 -0.000576047 -0.002183476 0.002139278 -0.003948046 -0.000022703 0.000079746 0.000014079 0.000003954 -0.000026430 -0.000019700 0.000083109 0.000015591 0.000004632 -0.000031014 0.000024173 -0.000055917 -0.000016709 -0.000015879 0.000008818 -0.000027350 0.000118241 0.000016948 -0.000002621 -0.000047472 -0.000024771 0.000125846 0.000019115 -0.000002245 -0.000053509 -0.000002583 0.000044461 0.000001523 -0.000011096 -0.000026718 0.006629306 -0.032615249 -0.019348252 -0.052001483 -0.003121120 0.000852999 -0.015166490 0.014363599 -0.015499865 0.001040213 0.003310687 -0.034192704 -0.012031492 -0.015516743 0.009253665 0.003568873 -0.043318286 -0.004488013 0.051188804 -0.002665817 -0.001490002 -0.007235352 0.019597040 0.006611549 -0.002015898 -0.007142584 0.033813156 0.002538747 -0.009488216 -0.000406283 0.000001325 -0.000008780 -0.000001546 0.000001256 0.000008369 -0.000010657 0.000046202 0.000005477 -0.000002328 -0.000019069 -0.000001249 -0.000007187 -0.000001770 -0.000004867 -0.000004736 -0.000005666 0.000055216 0.000006897 -0.000003522 -0.000026604 -0.000062843 0.000209768 0.000029775 0.000004949 -0.000074237 0.000023598 -0.000099811 -0.000012589 0.000013237 0.000052725 0.000009533 -0.000035597 -0.000005354 -0.000003435 0.000007461 -0.000002308 0.000005726 -0.000000144 0.000000316 -0.000000037 -0.000004017 0.000020829 0.000002490 0.000000297 -0.000006314 -0.000002172 0.000002365 0.000000320 0.000002312 0.000003190 -0.000009135 0.000041072 0.000005862 0.000000807 -0.000013169 0.000005787 -0.000008468 -0.000001532 -0.000003260 -0.000002803 0.000002690 -0.000016814 -0.000002288 0.000000667 0.000007204 -0.000004593 0.000019731 0.000003520 0.000001107 -0.000007226 -0.000001866 0.000000109 0.000000340 0.000000860 0.000000838 0.000003642 -0.000023504 -0.000003775 -0.000000340 0.000009564 -0.000001652 0.000006951 0.000001214 0.000000802 -0.000001736 -0.000003034 0.000008469 0.000001864 0.000001163 -0.000002359 0.000001605 -0.000008543 -0.000001590 0.000003107 0.000008568 0.000021550 -0.000091574 -0.000014132 -0.000006649 0.000025725 -0.000006163 0.000067993 0.000010551 -0.000000807 -0.000027781 -0.000008366 0.000044562 0.000006258 0.000001039 -0.000014224 0.000000262 0.000011899 0.000002742 0.000003363 -0.000002055 0.000007370 -0.000018570 -0.000003470 -0.000003397 0.000002249 -0.000007675 0.000028625 0.000004860 0.000001580 -0.000008694 -0.000009242 0.000040190 0.000006932 0.000003784 -0.000010257 0.000007113 -0.000075211 -0.000011800 -0.000002064 0.000027001 -0.000002068 -0.000002547 0.000000000 0.000001943 0.000003693 0.000001661 -0.000013665 -0.000002243 -0.000000062 0.000006264 -0.000000919 -0.000004303 -0.000000208 0.000000627 0.000002299 0.000052120 -0.000168104 -0.000060581 -0.000099395 -0.000083826 0.000221306 -0.000162400 -0.000078999 -0.000131960 -0.000042312 0.000061275 -0.000003539 -0.000013354 -0.000119325 -0.000130669 0.000445669 -0.000246739 -0.000103308 -0.000116273 0.000163204 -0.000031094 0.000087690 0.000078760 0.000246347 0.000135708 0.000295251 -0.000680320 -0.000195828 -0.000209395 0.000144059 -0.000085399 0.000086509 0.000034226 0.000058715 0.000059810 0.000015513 -0.000195985 -0.000020735 0.000033815 0.000146751 -0.000029279 0.000028881 0.000013314 0.000040579 0.000035351 0.000024782 -0.000190476 -0.000029142 -0.000005517 0.000067436 0.000112694 -0.000114259 -0.000043656 -0.000067652 -0.000027679 0.000052633 -0.000100957 -0.000027127 -0.000033006 0.000007223 0.000014851 -0.000069657 -0.000012830 -0.000012757 0.000013940 -0.000005376 0.000022797 0.000003514 0.000001448 -0.000007804 -0.000001205 -0.000026677 -0.000003288 -0.000001176 0.000007322 0.000010280 -0.000042695 -0.000007443 -0.000003781 0.000011179 0.000006890 -0.000006899 -0.000002187 -0.000002373 0.000000561 -0.000002040 -0.000023795 -0.000002309 0.000003758 0.000015099 -0.000076880 -0.000072462 0.000018221 0.000054036 0.000028756 -0.000181747 0.000399289 0.000090280 0.000072589 -0.000129490 -0.000067640 0.000057277 0.000013519 0.000030753 0.000006652 0.000149294 -0.000231012 -0.000064773 -0.000071999 0.000045930 -0.000071640 0.000103980 0.000031285 0.000039278 -0.000024954 0.000035056 0.000022540 -0.000000011 -0.000011874 -0.000025326 -0.000009905 0.000055698 0.000009881 0.000009348 -0.000010365 0.000020705 -0.000005461 -0.000002702 0.000001634 0.000011144 -0.000011193 -0.000003086 0.000001040 0.000003697 0.000001752 0.000015219 -0.000056298 -0.000010607 -0.000008310 0.000013415 0.000010511 -0.000044792 -0.000008074 -0.000004047 0.000014931 0.000000044 -0.000020802 -0.000001706 0.000002526 0.000007190 0.000026179 -0.000053074 -0.000006786 -0.000006015 0.000014385 -0.000018985 -0.000004744 0.000000352 0.000039807 0.000020311 0.000007397 -0.000006727 0.000002269 -0.000027244 0.000002051 0.000001864 -0.000006627 -0.000001391 0.000002994 0.000001712 -0.000000309 -0.000010837 -0.000000847 0.000011763 0.000008168 -0.000001572 0.000005752 -0.000000318 0.000007230 -0.000004393 0.000005193 0.000017342 0.000001900 -0.000006378 -0.000019942 0.000003047 0.000009754 -0.000000924 -0.000008999 -0.000012004 -0.000002895 0.000014144 -0.000002480 -0.000004408 -0.000009129 -0.000004248 -0.000009834 -0.000001962 0.000004643 0.000011968 0.000001010 0.000019734 0.000002116 -0.000008402 -0.000015516 0.000000449 -0.000002839 -0.000000997 -0.000002248 0.000001572 -0.000032236 -0.000041527 0.000013902 0.000023163 0.000059542 -0.000042733 0.000013218 0.000015776 0.000081968 0.000008773 0.000015687 -0.000044030 0.000056950 -0.000056107 0.000050741 0.000050428 0.000058526 0.000004059 -0.000069835 -0.000109512 0.000003430 0.000038207 0.000015106 -0.000026221 -0.000018244 -0.000056318 0.000088670 -0.000002835 -0.000034401 -0.000038242 0.000071048 -0.000097695 -0.000037524 -0.000000267 0.000057355 -0.000014004 -0.000008402 0.000135115 -0.000121493 0.000047185 -0.000018218 -0.000015577 -0.000021264 0.000113585 -0.000002334 -0.000023312 -0.000040627 -0.000013316 0.000033916 0.000046927 0.000081505 -0.000046278 -0.000008541 -0.000044692 -0.000004412 0.000003500 -0.000030230 -0.000014323 -0.000004594 0.000036292 0.225192640 0.197410053 0.686503567 -0.056206989 -0.043801078 0.730942015 -0.080382500 -0.029979289 0.047595703 0.214472715 -0.018758658 -0.126818904 -0.059805694 0.182905718 0.663422863 0.000269738 0.000597421 -0.001861243 0.000332705 0.003236910 -0.000476921 0.000138997 -0.000134137 0.005010135 -0.003340741 0.000459411 0.000186539 0.003912672 -0.002257708 -0.001312037 -0.001873819 -0.002436720 -0.000666165 -0.000274619 -0.000867940 0.003762952 -0.003248306 -0.000424593 -0.000955534 0.000207809 -0.003098372 -0.001715427 -0.000566736 0.000359916 0.000204618 -0.001591051 0.014802569 0.008300209 0.001977848 0.007459177 0.000723475 0.008278070 0.001899344 0.007478871 -0.003787311 0.009937627 0.014118398 0.006433857 -0.003656524 -0.005075521 -0.047168324 -0.101341761 -0.005992243 -0.010734040 -0.025424447 -0.080903897 -0.094839995 -0.000191529 0.003961620 -0.003843582 -0.095085135 -0.262543239 0.002063066 0.000336125 0.005075871 0.007418024 0.024874682 -0.155296456 0.034145482 0.134320191 0.005294535 0.004424442 0.036187575 -0.056142249 -0.059133861 0.000118116 0.006130543 0.132665465 -0.057746502 -0.237465193 0.000005340 0.000014747 0.000033339 0.000016871 0.000022164 -0.000003162 0.000012177 0.000034546 0.000008671 0.000021856 0.000006710 -0.000005531 -0.000005020 -0.000004164 -0.000017659 0.000010079 0.000022477 0.000059304 0.000025638 0.000031432 0.000001540 0.000022082 0.000064716 0.000017862 0.000031648 0.000008779 0.000010689 0.000037366 0.000012595 0.000009387 -0.000878931 -0.002260436 0.000028722 -0.000614375 -0.001507509 0.000685621 -0.002711677 -0.000394397 -0.000660777 0.000446159 -0.001505342 -0.006221946 -0.002664919 -0.000107724 0.000588824 -0.004114746 -0.006752998 -0.003850526 0.000280309 0.000230997 0.001868788 -0.002236761 -0.000243456 -0.000765917 0.001159863 -0.000135835 0.003068577 0.001472188 0.000648617 0.001486944 0.000003343 -0.000003766 -0.000002391 -0.000004524 -0.000000781 0.000001686 0.000009516 0.000025206 0.000005012 0.000009470 -0.000001363 0.000002150 0.000000948 -0.000000530 -0.000008763 -0.000006601 0.000011822 0.000028712 -0.000026152 0.000009158 0.000019827 0.000047840 0.000135933 0.000038328 0.000021885 0.000004905 -0.000027754 -0.000063732 -0.000004900 -0.000022841 -0.000006386 -0.000005412 -0.000021236 -0.000010428 -0.000008458 0.000005230 0.000001133 0.000007636 0.000007168 -0.000000669 0.000003671 0.000004325 0.000016154 0.000003153 0.000003277 0.000003457 -0.000002355 -0.000000466 0.000005514 0.000003476 0.000004125 0.000007989 0.000025094 0.000007786 0.000008958 -0.000003343 0.000000472 0.000000861 -0.000005054 -0.000005091 -0.000001155 -0.000003672 -0.000012122 -0.000002872 -0.000002055 -0.000000241 0.000002466 0.000009779 0.000002652 0.000004988 -0.000000408 -0.000000299 -0.000002623 0.000000455 0.000000968 -0.000000293 -0.000004347 -0.000016418 -0.000001704 -0.000003301 0.000000273 0.000000605 0.000003567 0.000001501 0.000002282 -0.000001179 0.000000157 0.000000647 0.000001527 0.000004286 0.000007396 -0.000002308 0.000004377 0.000000998 -0.000007265 -0.000008972 -0.000010080 -0.000055458 -0.000020502 -0.000022683 0.000005173 0.000021042 0.000062991 0.000002509 -0.000004353 0.000005164 0.000010225 0.000034022 0.000002717 0.000006012 0.000002383 0.000000638 0.000013084 0.000003054 0.000001410 0.000001662 0.000002757 0.000003919 -0.000009477 -0.000018215 -0.000003057 -0.000001036 0.000005861 0.000010416 0.000018038 0.000000117 0.000002655 0.000016906 0.000011185 0.000017430 -0.000011050 -0.000023536 -0.000076549 0.000001845 0.000009731 0.000000480 -0.000004007 -0.000009271 0.000004597 0.000005087 0.000000174 -0.000003131 -0.000010944 0.000000149 -0.000000843 -0.000002742 -0.000001802 -0.000009087 -0.000000259 0.000002460 -0.000100231 0.000082319 0.000028167 0.000546293 0.000301808 -0.000110949 0.000093004 -0.000170742 0.000320867 0.000142951 -0.000103095 0.000072621 -0.000030831 0.000309876 0.000114473 -0.000185562 0.000003769 -0.000839207 -0.000485299 -0.000144812 0.000042233 -0.000500335 -0.001634479 -0.000057956 -0.000001237 0.000469776 0.000262524 0.000603368 0.000371187 -0.000219306 0.000070188 -0.000051400 0.000049799 -0.000297655 -0.000139550 0.000005932 -0.000039594 -0.000145978 -0.000161676 -0.000122443 -0.000002719 -0.000035885 -0.000061051 -0.000258071 -0.000091265 -0.000053301 -0.000029835 -0.000193928 0.000014633 0.000031345 -0.000049194 0.000054432 -0.000059996 0.000237224 0.000066925 -0.000026730 0.000021135 -0.000049591 0.000098313 0.000031670 -0.000011806 -0.000016177 -0.000067956 -0.000006870 0.000010356 0.000000883 0.000004167 0.000016159 -0.000000237 -0.000001906 -0.000003645 -0.000009937 -0.000024896 -0.000001728 0.000003803 -0.000003055 -0.000009259 -0.000031347 -0.000007740 -0.000003580 -0.000002010 0.000002138 -0.000003519 -0.000002265 -0.000001600 0.000002311 -0.000005966 -0.000015477 0.000008186 -0.000003819 0.000057656 -0.000171748 -0.000336063 -0.000019484 0.000062374 0.000021124 0.000035127 0.000403011 -0.000003607 0.000093587 0.000056470 -0.000025570 0.000097915 -0.000015848 0.000019131 -0.000032940 0.000038746 -0.000147364 0.000114279 -0.000019697 0.000094206 -0.000046157 0.000088047 -0.000052407 -0.000015060 -0.000022469 -0.000026811 -0.000107943 0.000007288 0.000033435 0.000002357 0.000012091 0.000037988 -0.000001178 -0.000003237 0.000005137 0.000004601 -0.000023687 -0.000011933 -0.000009521 0.000010322 0.000004103 0.000026490 0.000003595 -0.000016636 0.000000959 -0.000015500 -0.000063630 0.000004548 0.000003612 -0.000003002 -0.000005688 -0.000030645 -0.000004010 -0.000003268 -0.000003683 -0.000012598 -0.000038045 -0.000003119 0.000001460 -0.000002395 -0.000011629 -0.000004705 -0.000013723 -0.000024485 -0.000015023 0.000012307 -0.000004438 -0.000019029 -0.000012155 0.000016617 -0.000001200 -0.000012654 0.000016519 0.000005257 -0.000002775 -0.000002965 -0.000000940 -0.000002724 -0.000002087 -0.000007587 0.000000348 -0.000002619 -0.000010693 -0.000007309 -0.000004566 -0.000001580 0.000006700 -0.000002522 -0.000000018 -0.000003195 -0.000009837 0.000013149 0.000005978 0.000009710 0.000003343 -0.000005735 0.000007280 0.000008198 0.000006579 0.000000533 0.000000115 0.000007132 0.000004240 0.000006737 0.000001276 0.000004898 -0.000008590 -0.000003144 -0.000004205 0.000003357 -0.000002227 0.000011217 0.000009390 0.000008517 0.000001418 0.000000046 -0.000001744 0.000000664 -0.000000359 0.000000352 0.000100530 -0.000007182 -0.000022569 -0.000050994 -0.000056089 0.000014679 0.000007295 -0.000026799 0.000020527 0.000029970 0.000079534 -0.000044025 0.000018844 -0.000025400 0.000018572 -0.000083160 0.000041866 0.000055055 0.000040466 0.000005267 -0.000033112 -0.000012728 0.000033793 0.000026378 0.000035606 -0.000004957 0.000001776 0.000050744 0.000042523 -0.000019259 -0.000020465 -0.000011924 0.000006578 -0.000027464 0.000220910 0.000029945 -0.000079911 0.000108671 -0.000036182 -0.000063989 -0.000034290 0.000027556 -0.000079638 -0.000019538 -0.000001721 0.000013051 -0.000025466 -0.000021624 -0.000018904 0.000022207 -0.000023342 0.000028916 0.000021099 -0.000017367 0.000004878 -0.000003769 -0.000025814 0.000004735 0.000003497 0.109893836 0.045455819 0.064147430 0.105171396 0.096256021 0.276014748 0.001092952 0.000667462 -0.000363783 0.163026525 0.000700580 -0.003995528 0.001387412 -0.032602280 0.042829957 0.000051638 0.001675697 0.000115420 -0.147256041 0.056972484 0.000444073 0.000034719 0.000514257 0.000328187 0.001246687 -0.000585682 0.000737747 0.000019750 0.000706287 -0.003856484 -0.001496091 -0.000321700 0.000175317 -0.000690139 0.000260191 -0.000032510 0.000078520 -0.000086144 0.000589177 0.000423554 0.000046519 -0.000633608 0.000209612 -0.000285099 0.000570007 -0.000072273 0.000198616 -0.000093996 -0.000585309 -0.000633651 0.000543747 -0.000224191 -0.000606538 -0.000035991 0.000072454 0.000259677 -0.000125096 -0.000345567 0.000132978 -0.000670204 0.000817169 -0.000221019 -0.000772750 0.000002831 0.000260882 -0.000009564 -0.000003201 0.000010349 0.000001289 -0.000011587 -0.000010668 0.000005845 0.000009834 -0.000001251 0.000000762 0.000012505 0.000005115 -0.000008187 -0.000005183 0.000004346 -0.000011194 0.000000808 0.000014397 -0.000001267 -0.000013623 -0.000014062 0.000009470 0.000014295 -0.000003209 -0.000001481 -0.000000757 0.000004366 0.000004897 -0.000003501 -0.000003902 -0.000800437 -0.000078013 -0.000050140 0.000363381 0.000235560 -0.000123352 -0.000384556 0.000055793 0.000117833 0.000551228 -0.000249092 0.000079752 -0.000042537 0.001041626 0.000960593 -0.000164535 -0.000142869 -0.000132337 -0.003458112 -0.000769608 0.000027459 -0.000056209 -0.000035996 -0.000902924 0.000137229 0.000209165 0.000011359 0.000062463 -0.000644339 0.000740004 0.000004608 -0.000003605 -0.000000515 0.000000519 -0.000000476 -0.000005557 0.000001441 0.000010264 0.000001682 -0.000000320 0.000000619 0.000002016 -0.000004572 0.000000752 0.000002586 -0.000011117 0.000007891 0.000013336 -0.000001081 0.000002673 -0.000037742 -0.000018417 0.000033894 0.000012119 -0.000005725 0.000013871 -0.000001054 -0.000012442 -0.000004476 -0.000002345 0.000005195 0.000004668 -0.000006885 -0.000002112 0.000003086 -0.000001451 -0.000004826 0.000000664 0.000001628 -0.000002949 -0.000002681 -0.000001600 0.000003763 0.000001000 -0.000001342 0.000000687 -0.000004380 -0.000000361 0.000000307 -0.000002066 -0.000006002 -0.000002369 0.000007554 0.000001648 -0.000002489 0.000000790 0.000003898 -0.000001536 -0.000000861 0.000001735 0.000002727 0.000000161 -0.000002743 -0.000000497 0.000000625 -0.000002521 0.000000574 0.000002675 0.000000157 0.000000378 -0.000000047 -0.000000547 0.000000010 0.000000236 -0.000000038 0.000003358 -0.000001129 -0.000003469 -0.000000274 -0.000000629 -0.000000974 0.000000012 0.000000964 0.000000251 0.000000063 -0.000001112 0.000000448 0.000001121 -0.000000010 0.000000602 0.000002791 -0.000008201 -0.000002499 0.000000358 -0.000003387 0.000009956 0.000003657 -0.000013958 -0.000003967 0.000003087 -0.000011516 0.000005680 0.000011017 0.000001382 0.000001161 -0.000006491 -0.000001190 0.000007155 0.000001677 -0.000001497 -0.000000921 0.000002277 -0.000000176 -0.000000044 0.000000095 0.000001863 0.000000799 -0.000002258 -0.000000424 0.000000852 -0.000003651 0.000000121 0.000004740 0.000000783 0.000000340 -0.000005962 0.000000047 0.000006203 0.000001093 -0.000000730 0.000012517 -0.000001872 -0.000013427 -0.000002451 -0.000000001 0.000001209 -0.000001718 -0.000000960 -0.000000075 -0.000001010 0.000001896 -0.000001102 -0.000002116 -0.000000029 -0.000000702 0.000000248 0.000000834 -0.000000007 -0.000000100 0.000000901 0.000001252 0.000098255 -0.000025797 -0.000010743 0.000006046 -0.000088740 0.000226809 0.000154885 -0.000002676 -0.000028173 -0.000041886 0.000124363 0.000047848 0.000009599 -0.000006412 -0.000198510 0.000424891 0.000264194 0.000007556 -0.000037178 -0.000018493 -0.000142109 0.000301076 -0.000029632 0.000004591 -0.000224939 -0.000110375 0.000286169 -0.000033709 -0.000065259 0.000017092 -0.000069539 -0.000045958 0.000011319 0.000003164 0.000018920 -0.000083858 0.000001791 -0.000012574 -0.000008726 0.000010924 -0.000049119 -0.000027200 0.000000035 0.000003163 0.000015560 -0.000045021 -0.000004898 -0.000018781 -0.000005487 -0.000030531 0.000109855 0.000049981 -0.000004745 -0.000008372 -0.000004400 0.000031691 0.000017702 -0.000008240 -0.000004622 0.000010457 0.000007081 -0.000014966 -0.000002976 0.000001400 -0.000001626 0.000000111 0.000002774 0.000000936 0.000000714 0.000004327 -0.000003207 -0.000008957 -0.000000131 0.000000207 0.000008002 0.000003558 -0.000010033 -0.000001676 0.000000252 -0.000000273 0.000000018 0.000000649 -0.000001560 -0.000000570 0.000002889 -0.000001971 -0.000001039 0.000000314 -0.000000288 0.000058256 -0.000149782 -0.000039287 -0.000019504 0.000002697 -0.000007583 -0.000035737 -0.000055244 0.000024380 0.000031659 0.000048649 -0.000035859 -0.000035445 0.000000277 0.000010334 -0.000034741 0.000107368 0.000046933 -0.000007188 -0.000013809 0.000033445 -0.000054587 -0.000045576 0.000001639 0.000005843 0.000002527 0.000024500 -0.000013916 -0.000004829 -0.000001153 -0.000006466 -0.000007932 0.000015134 0.000001221 0.000001034 -0.000006372 -0.000027733 0.000011837 -0.000008180 -0.000006752 0.000001572 -0.000003788 0.000011243 0.000003744 -0.000000444 0.000010018 -0.000001131 -0.000006353 -0.000004811 -0.000003494 0.000006852 -0.000001233 -0.000006494 -0.000003006 -0.000001633 0.000001232 -0.000005821 -0.000000607 -0.000000131 -0.000000603 0.000001517 0.000000971 -0.000004105 0.000002430 0.000010177 -0.000001547 -0.000004257 -0.000002195 -0.000002529 -0.000009645 0.000000252 -0.000002226 0.000001007 0.000003892 -0.000001704 0.000000538 -0.000000293 -0.000000786 0.000000120 0.000001110 -0.000000350 0.000000519 -0.000001665 -0.000000961 0.000002444 -0.000000179 -0.000000323 0.000000308 -0.000000716 -0.000001244 0.000000169 0.000003071 0.000001627 -0.000000585 0.000004599 0.000001086 0.000001075 0.000001135 -0.000000159 0.000001337 0.000001145 0.000003317 0.000000762 -0.000002619 0.000004226 0.000000377 -0.000001693 -0.000001155 -0.000000187 -0.000001736 -0.000000380 0.000001121 0.000002329 -0.000000133 -0.000000570 0.000000708 0.000000319 -0.000000307 -0.000000313 0.000001384 -0.000000319 -0.000002413 -0.000001753 -0.000001199 -0.000009564 0.000001050 -0.000005444 -0.000002210 -0.000002760 -0.000008248 -0.000003706 -0.000003972 0.000001796 0.000011794 -0.000001464 -0.000002203 0.000008675 0.000008474 0.000005254 0.000010017 0.000000087 0.000002001 0.000002911 0.000001512 0.000000057 0.000004199 0.000005781 0.000007005 -0.000009037 -0.000007026 0.000001532 -0.000006041 -0.000007719 0.000004677 0.000019100 -0.000000068 0.000000883 0.000003013 0.000002671 0.000003763 -0.000002578 -0.000004387 -0.000006386 -0.000000016 -0.000011488 0.000002816 -0.000003596 -0.000005482 -0.000003968 -0.000001157 -0.000001456 0.000000554 0.000000221 0.000007037 0.000016310 0.000003123 -0.000004452 -0.000003496 -0.000001025 0.000003761 0.246981653 0.003197237 0.716185023 0.001358460 0.092448601 0.290154953 -0.004148660 -0.030429859 0.133129639 1.066005080 0.000873090 0.000830214 0.000821684 0.001184822 0.108860991 -0.000417545 0.000437125 -0.004071184 0.000027424 0.051723780 -0.000653282 -0.003079067 0.000018776 -0.004118064 0.108749034 0.000026282 0.000097088 0.000477836 0.001484919 0.001147600 0.000255666 -0.000261512 0.000692649 0.000010795 0.000695662 -0.000104847 -0.000411922 -0.000232041 0.000467322 -0.000021291 -0.000001138 -0.000180644 -0.000057115 0.000051979 -0.000002703 -0.000000394 -0.000199607 -0.000037842 -0.000001623 -0.000004557 -0.000003600 0.000144736 0.000007904 -0.000104288 0.000010535 -0.000003623 -0.000262534 -0.000097357 0.000007375 0.000000311 -0.000003552 -0.000290857 -0.000075210 -0.000032499 -0.000001589 -0.000004148 -0.000083479 -0.000051714 -0.000061390 0.000006865 -0.000219282 -0.238460139 -0.061727472 -0.188459766 -0.003312970 0.000001422 -0.060850417 -0.111417605 -0.106553755 -0.000507944 0.001218386 -0.182141169 -0.105242087 -0.500944372 -0.000123812 0.000109101 -0.283967259 -0.008111758 0.218939596 0.000610141 0.001086558 -0.008343234 -0.086727668 -0.017577981 -0.000119074 0.003198257 0.211540034 -0.016130539 -0.457341704 -0.001555097 0.000000072 0.000028795 0.000004596 0.000003924 0.000000028 0.000000226 -0.000091572 -0.000021106 -0.000001539 0.000001160 -0.000000223 0.000012719 0.000006867 -0.000007521 0.000000728 -0.000000661 -0.000134438 -0.000023911 -0.000020328 0.000000736 0.000001735 -0.000352006 -0.000082130 0.000000480 0.000011672 0.000000688 0.000186092 0.000037103 0.000015554 -0.000004084 -0.000000577 0.000055164 0.000016911 -0.000011855 -0.000001471 0.000000075 0.000002259 -0.000005916 0.000009899 0.000002085 -0.000000075 -0.000030457 -0.000010282 -0.000000716 0.000002168 0.000000146 0.000000307 -0.000003673 0.000005799 -0.000000584 0.000000110 -0.000071569 -0.000020566 0.000004846 0.000001991 -0.000000386 0.000016080 0.000005185 -0.000015067 0.000001642 0.000000198 0.000030222 0.000008559 0.000002324 -0.000001342 0.000000045 -0.000041432 -0.000007523 -0.000002146 -0.000000273 0.000000363 -0.000001500 0.000000588 0.000004534 -0.000000795 0.000000228 0.000043826 0.000008403 0.000008581 -0.000001178 0.000000026 -0.000012208 -0.000002101 0.000000433 -0.000000021 0.000000182 -0.000021329 -0.000002140 0.000001839 -0.000001228 0.000000134 0.000034859 -0.000000280 0.000006806 0.000002527 -0.000000361 0.000156727 0.000039745 -0.000004905 -0.000003620 -0.000000878 -0.000113892 -0.000023626 -0.000017658 0.000006219 -0.000000349 -0.000072663 -0.000019073 -0.000001969 0.000003107 -0.000000264 -0.000015313 -0.000002639 -0.000004927 0.000000777 -0.000000258 0.000040944 0.000008299 -0.000008104 0.000002885 0.000000153 -0.000058751 -0.000010429 0.000000895 -0.000001058 0.000000055 -0.000075769 -0.000016318 -0.000000059 -0.000000558 0.000000791 0.000114353 0.000025770 0.000015709 -0.000008222 0.000000310 -0.000001275 -0.000001438 0.000009611 -0.000002207 0.000000101 0.000025167 0.000003783 0.000007419 -0.000000971 0.000000224 0.000002215 0.000003428 0.000002124 -0.000001576 -0.000003499 0.000337954 0.000119580 -0.000019051 -0.000017529 0.000010273 0.000144708 0.000127594 -0.000036956 -0.000022408 0.000007652 -0.000003905 0.000041055 -0.000013688 -0.000013529 0.000016534 0.000225795 0.000197377 -0.000036632 -0.000034216 -0.000003207 -0.000086064 -0.000048003 0.000009258 -0.000089538 0.000011956 0.000634366 0.000103461 0.000013256 0.000045861 0.000001210 -0.000174290 -0.000079561 0.000015773 0.000014508 0.000000778 0.000261738 0.000024125 0.000016728 -0.000001150 -0.000002851 -0.000032991 -0.000027605 -0.000003339 0.000002349 -0.000002278 0.000269059 0.000042927 0.000000571 -0.000015055 0.000002562 0.000185461 0.000087086 -0.000017102 -0.000009645 -0.000000711 0.000143819 0.000043034 -0.000014081 -0.000005748 -0.000000349 0.000106465 0.000026164 -0.000002666 -0.000005632 -0.000000046 -0.000040462 -0.000007786 -0.000001747 0.000000942 0.000000823 0.000041861 0.000010626 0.000007486 -0.000002815 -0.000000395 0.000083422 0.000017247 -0.000004145 -0.000001620 -0.000000360 0.000011338 0.000003216 -0.000002762 -0.000000434 0.000001064 0.000033894 0.000006699 0.000007002 -0.000000698 -0.000004520 0.000154273 -0.000027013 0.000012375 -0.000024633 -0.000006422 -0.000521999 -0.000125628 0.000022146 0.000020691 -0.000004969 -0.000087065 -0.000036405 -0.000004579 0.000007437 0.000004217 0.000319811 0.000111802 -0.000011130 -0.000009583 -0.000002672 -0.000122441 -0.000055142 0.000010142 0.000006179 -0.000002853 0.000007296 0.000009087 -0.000019858 -0.000008575 -0.000000177 -0.000096394 -0.000018342 -0.000001575 0.000002672 -0.000001283 -0.000013386 -0.000008656 -0.000008511 -0.000001016 0.000003772 -0.000012019 -0.000003969 0.000018662 0.000001376 -0.000000476 0.000085891 0.000014329 -0.000006799 -0.000004074 -0.000000560 0.000074288 0.000013100 -0.000004857 -0.000001264 0.000001139 0.000040308 0.000005900 0.000009052 -0.000002709 0.000003142 0.000171004 0.000072905 0.000009438 0.000015583 -0.000003176 -0.000167006 -0.000006943 0.000161480 -0.000021816 0.000002062 0.000124546 0.000004640 0.000019160 0.000015771 0.000000250 0.000009829 0.000005266 -0.000016467 -0.000001872 0.000000013 -0.000018847 0.000019490 0.000027560 -0.000005379 -0.000000423 -0.000039666 -0.000006887 -0.000005569 -0.000003515 0.000000575 -0.000001874 -0.000008359 -0.000112795 0.000002155 0.000000162 0.000007441 -0.000018953 -0.000080762 0.000003537 -0.000000928 -0.000047411 -0.000027116 -0.000086815 -0.000002313 -0.000000431 -0.000007508 0.000000415 0.000040770 -0.000004063 0.000000008 -0.000014125 -0.000018595 -0.000043488 0.000004903 0.000000112 0.000009138 -0.000001546 -0.000019082 0.000000149 -0.000005701 -0.000026118 -0.000021909 0.000316279 -0.000011744 -0.000004471 -0.000174663 -0.000034211 -0.000057457 -0.000052846 0.000004874 0.000420281 0.000152500 0.000312249 0.000036889 0.000008784 0.000154226 -0.000023688 -0.000127217 0.000069986 0.000004538 0.000021682 -0.000005077 -0.000151986 0.000010530 -0.000005704 -0.000301515 -0.000229539 -0.000324024 -0.000017142 0.000006327 0.000294317 0.000195988 -0.000022819 0.000016935 0.000003442 0.000218982 0.000019938 0.000014180 0.000015882 -0.000004406 -0.000179022 0.000063150 0.000141455 -0.000034789 -0.000003424 -0.000069078 -0.000013892 0.000053938 -0.000037542 0.000008376 0.000301049 0.000153213 -0.000006631 0.000059148 0.000000089 0.000024626 0.000001777 -0.000044184 -0.000014998 0.071889127 0.103877841 0.271579945 0.000454066 -0.000336510 0.161784908 -0.003896318 0.001610344 -0.036479237 0.046553605 0.001854825 -0.000037491 -0.141692027 0.065538464 0.245045247 -0.000006753 0.000006437 -0.000009799 -0.000002280 -0.000010770 0.000002249 -0.000000571 -0.000011608 0.000006167 -0.000016942 -0.000010133 -0.000001445 0.000004892 -0.000013334 0.000011663 -0.000015307 0.000009273 -0.000016654 -0.000008274 -0.000015649 -0.000004589 0.000000545 -0.000019132 0.000001027 -0.000023749 -0.000013886 0.000002967 -0.000008830 -0.000012136 -0.000005328 -0.000577653 -0.001058439 -0.000093985 0.000047364 0.000097278 0.000228391 0.000789383 -0.000092908 -0.000000286 0.000019352 0.001095395 0.003047663 -0.000179829 0.000001490 0.000015228 -0.000313021 0.000123266 -0.000766024 -0.000005134 -0.000136351 0.000410895 0.000061713 -0.000155969 -0.000347805 0.000098974 0.000688361 0.001108272 0.000179102 0.000170420 -0.000042589 -0.000000364 0.000000787 0.000001101 -0.000003060 0.000007184 -0.000000862 -0.000000168 -0.000001990 -0.000003374 -0.000010512 0.000002121 -0.000002016 0.000003360 0.000004627 -0.000001203 0.000004991 -0.000004820 -0.000004191 0.000019067 -0.000027715 -0.000004099 0.000001005 -0.000030134 -0.000015640 -0.000024198 -0.000002569 0.000003867 0.000013384 -0.000013316 0.000036440 0.000003407 -0.000002480 0.000005666 0.000010037 -0.000001489 -0.000003196 0.000002029 -0.000001767 -0.000009236 0.000005111 -0.000001808 0.000000613 -0.000003021 -0.000005103 -0.000001302 -0.000002184 0.000001995 -0.000002206 -0.000007538 0.000006910 -0.000002714 0.000001330 -0.000005506 -0.000005552 -0.000004179 0.000002016 -0.000002336 0.000001735 0.000005500 -0.000005731 0.000000782 0.000000079 0.000002587 0.000001345 0.000003174 0.000000237 -0.000000407 -0.000003362 -0.000000271 -0.000003764 0.000000064 0.000000341 0.000000062 0.000000766 0.000000336 -0.000000727 0.000001146 0.000003730 -0.000000144 0.000005235 0.000000142 0.000000063 -0.000001628 -0.000000579 -0.000000642 0.000000585 -0.000000122 -0.000002036 0.000000956 -0.000001884 -0.000003653 0.000002317 0.000001720 -0.000012777 0.000007149 0.000004327 -0.000002270 0.000017921 0.000021692 0.000007479 0.000001102 -0.000002455 -0.000000472 0.000001539 -0.000013513 -0.000001126 0.000000428 -0.000004769 -0.000001386 -0.000004945 0.000000377 0.000000149 -0.000001978 -0.000002376 0.000000808 0.000000686 -0.000001701 0.000009883 0.000001327 0.000000657 0.000000472 -0.000000229 -0.000011047 -0.000002734 -0.000008678 -0.000000410 0.000000992 -0.000012868 -0.000001305 -0.000004110 -0.000000714 0.000001754 -0.000000080 -0.000002259 0.000010547 -0.000001675 0.000001718 -0.000001163 -0.000005294 0.000004228 -0.000000934 0.000001235 0.000001420 -0.000001089 0.000004450 0.000000963 -0.000000175 -0.000000868 0.000003143 -0.000001025 -0.000005845 0.000004454 0.000027137 0.000046419 0.000037774 -0.000003196 -0.000002233 0.000058505 0.000123349 0.000001126 -0.000003198 0.000001011 0.000004133 0.000080429 -0.000015868 0.000029519 -0.000010790 0.000105667 0.000171573 0.000110305 -0.000043888 0.000017293 0.000044588 -0.000068316 0.000073642 -0.000034440 0.000004714 0.000074039 -0.000162502 0.000054455 0.000009641 -0.000002960 -0.000043197 -0.000065945 -0.000025077 0.000004152 -0.000000841 0.000009411 -0.000023798 0.000028102 0.000005550 -0.000001887 -0.000016901 0.000001424 0.000008743 0.000000916 0.000000152 -0.000001116 0.000017836 -0.000003306 -0.000008441 0.000002724 0.000048028 0.000054060 0.000034817 -0.000002588 0.000000566 0.000016531 0.000022507 0.000009293 0.000002279 -0.000000891 0.000001567 0.000010019 -0.000001386 0.000000542 -0.000000560 -0.000002108 -0.000000463 -0.000003422 0.000000947 -0.000000041 -0.000000112 0.000001698 -0.000000522 -0.000000177 0.000000332 0.000005045 0.000002681 0.000006634 0.000000013 -0.000000024 0.000002238 0.000002541 0.000003801 -0.000000268 0.000000358 0.000001771 -0.000004605 0.000001191 -0.000012276 0.000005501 -0.000017830 -0.000069131 -0.000011736 0.000006936 -0.000000999 -0.000063513 -0.000038393 -0.000053256 0.000002070 0.000001820 -0.000022919 -0.000020042 -0.000027100 -0.000005315 0.000001181 0.000053092 0.000049243 0.000046484 -0.000006682 0.000003346 -0.000006329 -0.000065200 0.000005513 -0.000002052 0.000001592 0.000015903 0.000010785 0.000021263 0.000001343 -0.000000590 -0.000003456 0.000001325 -0.000002017 -0.000001518 0.000000713 0.000008834 -0.000002799 0.000012454 -0.000002802 0.000000631 0.000000868 -0.000011463 -0.000000247 -0.000001679 0.000000705 0.000005216 0.000000301 0.000004668 -0.000000193 0.000000305 0.000004219 0.000001943 0.000004451 -0.000001787 0.000000690 0.000001261 -0.000003348 0.000002192 0.000005926 -0.000007467 0.000000255 -0.000007434 0.000004781 0.000030126 -0.000015764 0.000013417 0.000015873 -0.000003902 -0.000019098 0.000024534 -0.000003884 -0.000010501 0.000009333 0.000001497 -0.000003966 0.000001098 0.000000945 0.000000009 0.000013121 -0.000009934 0.000003826 0.000006060 -0.000002066 0.000001221 -0.000007194 -0.000000330 0.000001128 -0.000002647 -0.000011161 -0.000005264 -0.000007432 -0.000001680 -0.000004352 -0.000012312 0.000004112 -0.000004179 -0.000005220 0.000000222 -0.000004732 0.000001928 -0.000001878 -0.000000525 -0.000001642 0.000006293 0.000003026 0.000005257 0.000001843 0.000002938 -0.000011932 0.000003039 -0.000006462 -0.000004975 -0.000001671 -0.000001220 0.000002182 0.000000580 -0.000001300 0.000001573 0.000072984 -0.000040799 0.000008972 -0.000006529 0.000004245 0.000032607 -0.000047385 0.000021930 0.000036583 -0.000015899 0.000024216 -0.000016887 -0.000005123 -0.000016458 0.000009645 -0.000089535 0.000045907 -0.000038549 -0.000023938 -0.000009236 -0.000010074 0.000044827 -0.000002140 -0.000000289 -0.000001337 -0.000045191 0.000086690 0.000003773 0.000004635 -0.000003808 0.000011764 -0.000036546 -0.000001670 -0.000018656 0.000025627 -0.000029727 0.000039959 0.000002769 -0.000012354 0.000005198 0.000042674 -0.000076692 0.000011342 0.000026015 -0.000020587 0.000034934 -0.000007149 0.000026164 0.000015707 0.000004336 -0.000014994 -0.000005993 -0.000028927 -0.000044331 0.000023784 0.000004694 0.000010676 0.000010413 0.000000166 0.000019331 0.066048125 0.056085659 0.129771396 -0.042772080 -0.105438760 0.758721569 0.027661491 0.002753080 -0.025512573 0.161179637 0.003270106 0.034790676 -0.027383806 0.187467461 0.305366995 -0.040909899 -0.053830448 -0.116016530 0.174622340 0.246497452 0.000060413 0.000079075 -0.000038938 0.000099501 0.000121153 0.000036287 0.000022752 0.000010056 0.000070946 0.000053877 0.000000713 0.000028578 0.000039243 0.000039181 0.000062014 0.000083451 0.000088405 -0.000085300 0.000107555 0.000118885 0.000046053 0.000014709 -0.000012451 0.000066806 0.000034455 -0.000066130 -0.000033494 0.000087895 -0.000055724 -0.000030787 0.000032593 0.000027748 -0.000047305 0.000023747 0.000024244 -0.000051713 -0.000003057 0.000052159 -0.000042942 -0.000013887 0.000103237 0.000085906 -0.000148827 0.000116232 0.000197697 -0.000082301 -0.000046806 0.000055521 -0.000083755 -0.000071257 -0.000056962 -0.000075728 0.000042550 -0.000076255 -0.000091173 0.000036260 0.000010690 -0.000012812 0.000025117 0.000001527 0.000071413 0.000077742 -0.000084400 0.000089651 0.000132083 -0.000055943 -0.000100987 0.000082754 -0.000082068 -0.000147250 -0.000021520 -0.000021314 0.000034555 -0.000018932 -0.000025148 0.000002871 -0.000006746 0.000006108 0.000001442 -0.000005372 -0.000071337 -0.000068588 0.000080469 -0.000082839 -0.000102617 0.000014049 0.000016129 0.000002373 0.000022560 0.000025681 0.000012154 0.000015350 -0.000023080 0.000011928 0.000010959 0.000011341 0.000021562 -0.000020094 0.000015623 0.000029399 -0.000010509 -0.000008542 -0.000005389 -0.000017267 -0.000019301 -0.000016624 -0.000024238 0.000016292 -0.000024329 -0.000038080 -0.000006886 -0.000009609 0.000006086 -0.000010051 -0.000016242 0.000009850 0.000019590 -0.000021640 0.000012071 0.000022656 -0.000014473 -0.000040590 0.000054190 -0.000027098 -0.000069247 0.000054833 0.000065233 -0.000052019 0.000068536 0.000091066 -0.000018695 -0.000005074 0.000008420 -0.000010567 0.000002108 -0.000054822 -0.000058666 0.000053436 -0.000063867 -0.000079851 -0.000020110 -0.000040156 0.000038015 -0.000033215 -0.000062581 0.000044569 0.000048980 -0.000038779 0.000057286 0.000075625 -0.000001719 0.000002348 -0.000003699 -0.000002959 0.000000421 -0.000023403 -0.000026026 0.000025297 -0.000031131 -0.000037941 0.000013135 0.000015173 -0.000021680 0.000014538 0.000016879 -0.000007514 -0.000009665 0.000004724 -0.000011651 -0.000015320 -0.000012644 -0.000018446 0.000014012 -0.000017903 -0.000025153 0.000008777 0.000013936 -0.000017743 0.000010145 0.000016470 0.000077336 0.000104118 -0.000104340 0.000101313 0.000137862 -0.000014009 -0.000002034 -0.000001626 -0.000021335 -0.000010265 0.000017347 0.000031775 -0.000037375 0.000020384 0.000038044 0.000016848 0.000016975 -0.000014147 0.000022765 0.000027910 -0.000008434 -0.000016077 0.000017456 -0.000010054 -0.000018008 0.000004749 -0.000002677 0.000006694 0.000008262 0.000002109 -0.000036018 -0.000044967 0.000043130 -0.000048023 -0.000062904 0.000013437 0.000001787 -0.000001549 0.000018370 0.000008530 -0.000013076 -0.000020762 0.000032416 -0.000012543 -0.000020909 0.000009786 0.000012567 -0.000013443 0.000013475 0.000016818 0.000013640 0.000013530 -0.000013325 0.000018112 0.000019521 0.000005350 0.000006102 0.000003093 0.000010669 0.000013400 0.000021830 0.000030359 -0.000026842 0.000030075 0.000042026 0.000005490 0.000010615 -0.000009684 0.000007515 0.000013549 0.000015768 0.000022027 -0.000034276 0.000016349 0.000023360 -0.000001322 -0.000007243 0.000012336 0.000000153 -0.000005749 0.000003917 0.000002992 0.000001380 0.000006345 0.000006754 0.000001868 0.000000797 -0.000005691 0.000000737 -0.000001331 -0.000003721 -0.000008583 0.000006913 -0.000004895 -0.000011817 -0.000017639 -0.000008852 0.000004741 -0.000026085 -0.000019927 -0.000006361 -0.000003363 0.000007108 -0.000007077 -0.000004626 0.000018677 0.000013449 -0.000009026 0.000026345 0.000024142 -0.000003058 -0.000006972 0.000009826 -0.000003058 -0.000007319 0.000003272 0.000000458 0.000007465 0.000007338 0.000006444 0.000003754 0.000007674 -0.000006459 0.000004883 0.000010134 -0.000008943 -0.000011398 0.000012690 -0.000010873 -0.000014774 -0.000000161 -0.000000448 -0.000003587 -0.000001956 -0.000003221 -0.000001425 -0.000003361 0.000004899 -0.000000945 -0.000003234 -0.000007606 -0.000013601 0.000015856 -0.000008709 -0.000015968 -0.000002000 -0.000004510 0.000000089 -0.000003999 -0.000008064 -0.000073484 -0.000030457 0.000217644 0.000034019 0.000014420 0.000045668 -0.000010330 -0.000117722 -0.000013702 -0.000063461 0.000003579 -0.000004917 0.000023544 0.000051675 -0.000010329 0.000009926 0.000010493 0.000064451 0.000075578 0.000052116 0.000005076 0.000014661 0.000018121 0.000033345 0.000032319 0.000015080 0.000001747 -0.000019550 0.000019860 -0.000007659 -0.000013065 0.000001481 -0.000021781 -0.000033472 -0.000013007 -0.000017332 0.000000265 0.000076035 0.000033895 0.000033426 -0.000040695 -0.000000482 0.000062444 -0.000025525 0.000014404 0.000004723 -0.000004392 0.000015364 0.000021461 -0.000000561 -0.000001324 -0.000001757 -0.000060581 -0.000046482 -0.000032780 -0.000013241 -0.000001078 0.000054961 0.000015895 0.000021376 -0.000049566 -0.000013750 0.000072174 -0.000047571 0.000011522 0.000041466 0.000019110 -0.000038588 0.000057146 0.000007548 -0.000054866 -0.000007157 0.000006655 -0.000110306 0.000006528 -0.000010576 0.000005706 -0.000009423 -0.000021933 0.000001327 0.000037498 0.000010140 -0.000009768 0.000067036 0.000016389 -0.000021772 0.000000790 0.000009679 -0.000022398 -0.000005639 -0.000003643 -0.000023486 0.000000562 -0.000015060 -0.000036024 -0.000028906 0.000002598 0.000050874 -0.000004979 0.000016467 0.000022488 0.000013394 -0.000011435 0.000030579 0.000026155 -0.000028631 -0.000018379 0.000034781 -0.000040666 -0.000013003 -0.000000229 -0.000014311 0.000002597 -0.000001964 -0.000022267 0.000004067 -0.000016467 -0.000004666 0.000006215 -0.000035893 0.454573442 0.000042291 0.236642150 0.000046579 0.074481877 0.070734527 0.000050733 0.215124747 0.140538508 0.642020359 0.000018802 0.049609043 0.003554305 -0.004312837 0.292174736 0.000028434 0.008719461 0.026237390 -0.023897333 0.011790162 0.000019935 0.026566824 -0.019654924 -0.128715204 -0.264313834 -0.000007758 -0.000012131 -0.000003950 -0.000006420 -0.000011488 -0.000034201 0.000035779 0.000013241 0.000015050 0.000038997 0.000090251 -0.000003036 -0.000004249 0.000002438 -0.000006965 -0.000024113 0.000057623 0.000015014 0.000031427 0.000055851 -0.000003591 0.000133465 0.000051022 0.000059339 0.000144738 -0.000002105 -0.000074691 -0.000023096 -0.000038896 -0.000076133 0.000051180 -0.000018090 -0.000010712 -0.000002804 -0.000024460 -0.000033360 -0.000003195 0.000004518 -0.000004376 -0.000001260 -0.000002604 0.000011258 0.000007001 0.000006091 0.000011636 0.000004569 -0.000001240 0.000001994 -0.000003271 0.000000614 -0.000028950 0.000026109 0.000013644 0.000009353 0.000030193 0.000014389 -0.000003569 -0.000002852 0.000006101 -0.000010083 -0.000007433 -0.000012082 -0.000005970 -0.000006556 -0.000011690 0.000005055 0.000016484 0.000004440 0.000007189 0.000017797 -0.000013489 -0.000000464 -0.000000694 -0.000002630 0.000001920 -0.000012773 -0.000018519 -0.000005181 -0.000011764 -0.000016918 -0.000006616 0.000004529 0.000001068 0.000001588 0.000005370 -0.000001033 0.000008058 0.000000841 0.000001589 0.000010462 -0.000019751 -0.000015642 0.000000656 -0.000007641 -0.000016197 0.000015812 -0.000058096 -0.000024728 -0.000022285 -0.000066296 0.000010568 0.000046070 0.000015728 0.000029791 0.000042389 -0.000014867 0.000027626 0.000012372 0.000013800 0.000028849 -0.000016205 0.000005834 0.000001286 0.000005181 0.000004746 0.000023060 -0.000014203 -0.000004399 -0.000000505 -0.000020603 -0.000003984 0.000022918 0.000005788 0.000007713 0.000026766 -0.000010314 0.000028994 0.000009599 0.000011060 0.000032975 -0.000000861 -0.000045434 -0.000016824 -0.000029943 -0.000041138 -0.000005802 -0.000000985 0.000000686 -0.000006076 0.000003247 -0.000005390 -0.000010882 -0.000002194 -0.000008170 -0.000009271 -0.000000765 -0.000001030 -0.000002614 -0.000002316 0.000000721 0.000019573 -0.000135033 -0.000060900 -0.000037471 -0.000141188 -0.000015257 -0.000037982 -0.000045776 -0.000023658 -0.000042286 -0.000003088 -0.000003042 -0.000015268 -0.000002209 0.000009007 0.000007297 -0.000049947 -0.000060241 -0.000050151 -0.000068016 0.000001949 0.000030882 0.000032972 0.000040696 0.000006122 0.000007345 -0.000151597 -0.000072634 -0.000114150 -0.000195437 -0.000011495 0.000071902 0.000033251 0.000015813 0.000077357 0.000009906 -0.000086187 -0.000020492 -0.000049634 -0.000102221 0.000006004 0.000013858 0.000013115 0.000009340 0.000008036 0.000003271 -0.000093156 -0.000027587 -0.000040501 -0.000106390 0.000005202 -0.000070796 -0.000035686 -0.000024712 -0.000076229 0.000008390 -0.000048729 -0.000020043 -0.000015559 -0.000058483 0.000007960 -0.000038224 -0.000016543 -0.000017238 -0.000041976 0.000000965 0.000015640 0.000004566 0.000007411 0.000016532 -0.000003493 -0.000017464 -0.000007573 -0.000012256 -0.000014755 0.000005232 -0.000032175 -0.000010365 -0.000011083 -0.000036174 0.000004359 -0.000003562 -0.000001408 0.000000047 -0.000005391 -0.000002577 -0.000013518 -0.000004730 -0.000010121 -0.000011785 -0.000000431 -0.000062625 -0.000001155 -0.000017144 -0.000071308 -0.000014096 0.000172562 0.000062096 0.000080665 0.000204980 -0.000000571 0.000036233 0.000014497 0.000022487 0.000033406 0.000011764 -0.000111091 -0.000051009 -0.000054623 -0.000123114 0.000002091 0.000038099 0.000023890 0.000021053 0.000042498 0.000008261 -0.000005678 -0.000000593 0.000012123 -0.000012817 0.000000430 0.000037533 0.000011067 0.000017427 0.000039184 -0.000001023 0.000010719 0.000006983 0.000009610 0.000003895 -0.000003452 0.000001289 0.000001299 -0.000010958 0.000010242 0.000001734 -0.000029934 -0.000008266 -0.000009930 -0.000036187 0.000001310 -0.000026659 -0.000007552 -0.000008940 -0.000031559 -0.000003128 -0.000018189 -0.000004105 -0.000011789 -0.000015638 0.000167990 -0.000070140 -0.000061628 -0.000030148 -0.000067092 -0.000067892 0.000037966 -0.000003006 -0.000072509 0.000097332 0.000017109 -0.000056527 -0.000010699 -0.000023858 -0.000045896 0.000072425 -0.000001035 -0.000000218 0.000007352 -0.000008793 0.000023892 0.000004680 -0.000017613 -0.000015436 0.000014886 -0.000010475 0.000015861 0.000009286 0.000007971 0.000013161 -0.000034502 0.000019803 0.000018819 0.000064005 -0.000022491 0.000057035 0.000008839 0.000027800 0.000044531 -0.000020738 0.000031019 0.000034482 0.000033774 0.000052136 0.000005417 0.000020707 -0.000003154 -0.000002963 -0.000023408 0.000012078 -0.000068464 0.000011323 0.000019213 0.000028006 -0.000003520 0.000044892 0.000000190 0.000004192 0.000008546 -0.000006733 0.000042867 -0.000019066 -0.000079789 -0.000155947 0.000077780 -0.000008063 0.000076567 0.000065870 0.000059986 0.000043967 -0.000035463 -0.000192357 -0.000202012 -0.000195400 -0.000106345 -0.000013264 -0.000061507 0.000004531 0.000058956 -0.000089468 0.000021125 0.000005389 0.000035746 0.000076292 -0.000037235 -0.000006548 0.000164996 0.000220242 0.000199439 0.000075597 -0.000014279 -0.000110983 -0.000126727 -0.000040650 -0.000130816 0.000026201 -0.000076123 -0.000035501 -0.000022122 -0.000081791 0.000014239 0.000049134 -0.000044442 -0.000056459 0.000079388 0.000009257 0.000021635 0.000008780 -0.000029007 0.000042362 -0.000004138 -0.000122521 -0.000107693 -0.000038186 -0.000131252 -0.000013940 -0.000005758 0.000020462 0.000010718 -0.000017518 0.041569185 0.035617209 0.592258916 -0.000001137 0.000001909 0.542142701 0.000009747 -0.000015398 -0.042667406 0.668142041 -0.000006934 0.000008598 -0.241011332 -0.093607016 0.357517316 0.000006255 -0.000010171 -0.161258869 0.064583139 0.035420237 0.000039220 -0.000064552 0.063918046 -0.253900680 -0.000565798 -0.000012049 0.000022708 0.041064726 0.000745720 -0.107505508 -0.000011843 0.000018543 -0.231615997 0.018833553 0.106229615 0.000006823 -0.000006162 0.043817472 -0.112952739 -0.017671814 0.000006441 -0.000005751 0.097726590 0.000411155 -0.139722995 0.000004062 -0.000004364 -0.006197490 -0.024040400 0.017509328 0.000012649 -0.000016704 -0.059808750 0.010247829 0.039358459 -0.000004769 0.000012269 0.028001979 0.016566805 -0.014156406 -0.000004481 0.000003999 -0.007016047 0.022726084 0.000879112 0.000002278 -0.000006000 -0.000703644 0.000852884 0.001198924 -0.000000051 -0.000003188 0.008508020 -0.015423096 0.001984426 -0.000002140 0.000002553 0.003609917 -0.000812146 0.003947285 0.000000806 -0.000002625 0.000006376 -0.003754056 0.003678505 -0.000000205 -0.000004747 0.003796917 0.004023537 0.005118003 0.000004357 0.000001118 0.044195561 0.000613919 -0.022584858 -0.000021310 0.000033329 0.014973904 -0.034095026 0.003821211 0.000008350 -0.000009109 -0.028693251 0.011814053 0.023425862 0.000010566 -0.000012680 -0.039959526 0.005902701 0.018828298 0.000001097 -0.000000806 0.027815070 -0.004702656 -0.018892134 -0.000005090 0.000013652 0.013774657 -0.005066078 -0.016048804 0.000003601 -0.000011528 0.000707794 -0.001116479 0.003295853 0.000007993 -0.000015014 -0.002029500 -0.001459698 0.003837870 -0.000010462 0.000010603 0.003403680 0.002870049 0.001570486 0.000002160 -0.000006355 -0.000946367 0.000196058 0.000115927 -0.000000028 -0.000000101 0.000545973 0.000348667 -0.000638463 -0.000002667 -0.000000741 -0.000234532 -0.000578223 -0.000263468 -0.000056384 0.000052041 -0.000352266 0.000187189 -0.000390519 -0.000026231 0.000042539 -0.000112295 -0.000737711 0.000653361 -0.000010985 -0.000003322 -0.000264250 0.000138109 -0.000021917 -0.000020640 0.000087563 -0.000145653 -0.000528203 0.000149433 0.000022679 0.000004677 0.000225199 -0.000010147 -0.000041963 -0.000011784 0.000133870 -0.000004054 -0.000024485 0.000000863 0.000029096 -0.000029498 -0.000290988 0.000706578 -0.000154419 -0.000003969 0.000050864 0.000111114 0.000359564 0.000033077 0.000009344 0.000002714 -0.000342228 0.000717397 0.000238690 -0.000015580 0.000050843 0.000244248 -0.000220092 0.000009119 -0.000024240 0.000035960 -0.000036405 -0.000153464 -0.000110484 -0.000013251 0.000032870 0.000033732 -0.000060596 0.000006326 -0.000013125 0.000021530 0.000314356 -0.000235825 -0.000025128 0.000002240 -0.000005878 -0.000281652 0.000310941 0.000056871 -0.000005291 0.000002789 0.000028503 -0.000130298 0.000039811 -0.000007044 0.000016433 0.000003890 -0.000017188 -0.000005904 -0.000001232 0.000004043 0.000012235 -0.000032609 -0.000003385 -0.000002080 0.000001987 -0.000055407 0.000044549 0.000001160 -0.000000456 0.000022170 -0.000032201 0.000208013 0.000020707 0.000024467 -0.000119112 -0.000039669 0.000199931 0.000064933 0.000006264 -0.000011645 -0.000065279 0.000072864 0.000029861 -0.000029120 0.000065824 0.000004731 -0.000197448 -0.000072148 0.000014600 -0.000028463 -0.000108780 0.000180184 0.000008337 -0.000002470 0.000012230 0.000053363 -0.000080418 -0.000026506 0.000006076 -0.000015159 0.000009229 -0.000001972 0.000006785 0.000008444 0.000005904 0.000007438 -0.000012622 0.000009293 0.000002243 -0.000013404 -0.000014116 -0.000013350 -0.000007478 -0.000003387 0.000019819 0.000014512 -0.000020616 0.000002636 -0.000003695 0.000016089 -0.000025859 0.000027446 0.000000328 -0.000001832 0.000001233 0.000006912 -0.000008507 -0.000004258 -0.000050412 0.000028305 -0.000003557 0.000003167 -0.000000278 0.000048900 -0.000111393 -0.000001929 0.000001358 -0.000002354 -0.000008850 -0.000001629 0.000004130 -0.000002590 -0.000005047 -0.000004649 0.000012274 -0.000001270 0.000001131 -0.000001048 -0.000006946 -0.000013349 -0.000001831 0.000001832 0.000000565 0.000008234 -0.000001335 -0.000000277 -0.000000274 -0.000000458 -0.000015461 0.000064106 0.000001208 -0.000000830 0.000001871 -0.000000706 0.000044783 -0.000000080 -0.000000431 0.000000085 0.000001806 0.000043426 -0.000000787 0.000000180 0.000002951 0.000007358 -0.000024076 -0.000000586 0.000000558 -0.000001875 0.000004242 0.000019991 0.000002392 -0.000002364 0.000000942 -0.000003522 0.000012269 -0.000000739 0.000000223 -0.000000205 0.000054554 -0.000171861 -0.000002699 0.000001263 0.000002492 0.000028187 0.000004031 0.000001360 -0.000000170 0.000000248 -0.000056056 -0.000103297 0.000001037 -0.000000700 0.000005648 -0.000032703 0.000093054 -0.000002694 -0.000000783 0.000005284 -0.000027971 0.000071443 -0.000002769 0.000000417 -0.000000597 0.000075284 0.000087397 -0.000000177 -0.000002447 0.000003017 -0.000107275 0.000092530 0.000011810 -0.000002680 -0.000006631 -0.000028492 0.000021448 0.000001764 -0.000001787 0.000002957 0.000023740 -0.000093042 -0.000005189 0.000003801 0.000000977 0.000018021 -0.000037820 0.000001969 0.000001565 -0.000004617 -0.000088277 0.000070176 0.000005671 -0.000002151 -0.000005806 -0.000007998 0.000030777 0.000010047 -0.000003070 -0.000012517 0.515695342 -0.052812745 0.653999649 -0.228556899 -0.096300120 0.368305965 -0.005626938 0.043918537 -0.005009887 0.511930811 0.029767078 0.021529273 -0.025159267 -0.066708940 0.756118556 0.002440935 -0.035600812 0.018132045 -0.235732474 -0.129067697 0.000887410 0.003512170 -0.007449599 -0.147806208 -0.098491056 -0.015854013 -0.051093030 0.024960093 -0.045296860 -0.313711987 -0.001199047 0.010331441 -0.010744070 0.070616723 0.141175037 -0.001808715 -0.000432974 0.004773942 -0.116288621 0.118981415 0.000392405 0.001560787 0.000681061 0.118857058 -0.274470671 0.004488200 0.001907417 0.001345235 0.019718076 -0.016615844 0.000300380 0.000046829 -0.000635059 -0.004355194 0.003372819 -0.000390268 -0.000922023 0.000407862 -0.022270015 0.006593789 -0.000570595 0.000221224 -0.000202343 0.012631440 -0.003230933 -0.112890747 -0.020967698 0.035436970 -0.033166866 -0.021523511 -0.046428500 -0.242116824 0.087978650 -0.017959458 -0.014004137 0.045076797 0.072535107 -0.126419842 0.024603051 0.017531747 -0.024603907 -0.047998997 0.038488641 0.047790606 0.023258062 -0.013206884 0.035383697 0.000668991 -0.017426470 -0.054919524 0.028186672 0.025653254 -0.019624676 -0.021674433 0.003204839 0.008816125 -0.010620447 -0.000368644 -0.000209905 -0.000675627 0.012473934 -0.016133540 -0.002947946 -0.000698469 0.000412969 -0.008659174 0.012663290 0.005367978 0.000394703 0.000301511 -0.001114641 0.002456847 0.006387554 0.000436097 0.003635020 0.002203910 0.001539894 0.000839953 0.004309514 -0.002997315 0.006230668 0.000183214 0.004391968 0.002175189 0.000306148 -0.000967899 0.000173932 -0.000925004 -0.000004367 -0.000074201 -0.002907421 0.000538067 0.000539084 0.000283951 0.000216219 0.000331894 0.000900288 -0.000477342 -0.000090586 0.000012100 -0.000689741 0.000446636 0.000064323 0.000193341 0.000091170 0.000067748 -0.000334559 0.000313485 -0.000150032 -0.000044392 -0.000292971 0.000551724 -0.000082853 -0.000095830 -0.000004537 0.000520373 -0.000704556 -0.000234600 0.000004441 0.000046686 -0.000292645 -0.001088451 -0.000588927 -0.000132690 -0.000045211 -0.000131673 -0.001777804 -0.001170029 0.000443476 0.000034154 -0.000029003 0.000016619 0.000329860 -0.000092449 -0.000014357 -0.000678553 0.000254588 -0.000259714 -0.000104498 0.000059081 -0.000012638 0.000004154 -0.000158129 0.000012593 -0.000002129 0.000537035 0.000082868 -0.000013195 -0.000176533 -0.000054211 -0.000267727 -0.001130308 -0.001822170 0.000346352 0.000015420 -0.000649849 -0.001232671 -0.000724978 0.000001257 0.000048581 -0.000019675 -0.000033819 0.000075236 0.000008178 0.000002005 -0.000020137 -0.000018425 0.000074677 0.000010053 -0.000007168 -0.000071515 -0.000062598 -0.000031895 0.000010860 0.000019217 0.000263698 -0.000198682 0.000020294 0.000030022 -0.000000601 0.000194668 -0.000043029 0.000065051 0.000062390 -0.000008660 0.000059530 -0.000032375 0.000034688 0.000058246 0.000014431 -0.000388525 0.000144477 -0.000150597 -0.000057473 0.000020017 0.000095584 -0.000149175 0.000088683 0.000055100 0.000043948 -0.000057427 0.000032659 0.000151669 -0.000044146 0.000000739 0.000010396 -0.000001204 0.000012456 -0.000004538 -0.000002314 -0.000018071 -0.000036913 0.000056873 0.000003891 0.000000129 -0.000035854 0.000033088 0.000003042 0.000010693 0.000008531 0.000002481 -0.000012002 0.000012772 -0.000001166 -0.000001127 -0.000008998 -0.000036262 -0.000005452 0.000016439 0.000003444 -0.000036287 -0.000002046 0.000040274 -0.000006477 0.000001021 0.000002424 0.000009637 -0.000003779 -0.000003248 0.000004048 0.000005667 0.000005094 -0.000003142 -0.000002608 0.000001780 -0.000008974 -0.000000942 0.000007712 -0.000004548 0.000004774 0.000001769 0.000002837 -0.000001048 -0.000001269 0.000001235 0.000004717 0.000002589 -0.000003675 0.000000709 -0.000001523 0.000000709 0.000000043 -0.000000105 -0.000000547 0.000000913 0.000000331 -0.000003916 -0.000000562 0.000003261 -0.000002935 -0.000001664 -0.000000930 0.000001177 -0.000000252 0.000001039 0.000001066 -0.000002515 -0.000001533 0.000003026 -0.000002979 -0.000000458 0.000002816 0.000000782 -0.000002582 0.000002393 -0.000003724 -0.000005464 0.000002745 0.000001665 -0.000000994 -0.000000314 0.000000980 0.000000243 -0.000000861 0.000000716 0.000002505 0.000002252 -0.000001858 0.000001200 -0.000000385 0.000001263 0.000001151 -0.000000791 0.000000889 -0.000001352 -0.000002386 -0.000006200 0.000000175 0.000004412 -0.000004097 0.000006451 -0.000010391 -0.000003383 0.000007037 -0.000005263 0.000004560 -0.000001079 -0.000001584 -0.000000511 0.000000846 -0.000000301 -0.000011615 0.000002071 0.000004477 -0.000003639 -0.000024228 0.000008537 0.000011317 -0.000009401 0.000008912 -0.000004863 -0.000007943 0.000001072 0.000003045 -0.000002108 0.000012315 0.000009476 -0.000009726 0.000000497 -0.000001455 -0.000005821 0.000007020 0.000002640 -0.000004737 0.000003683 -0.000013935 0.000001627 0.000010083 -0.000004549 0.000005356 -0.000019988 0.000004613 0.000014884 -0.000009328 0.000007634 0.342693628 0.086084257 0.567058288 0.102791604 -0.044950126 0.668233741 -0.156580698 -0.281405563 -0.129419236 0.373917785 0.020248753 0.009598051 -0.010900734 -0.000024248 0.115404212 -0.015799664 0.014557756 -0.016152084 -0.004081867 -0.128658378 -0.046930329 -0.007213883 0.014497136 0.005917585 -0.025703141 0.005078503 -0.247852177 0.017417104 0.140258015 -0.001082129 0.014913642 0.018065771 -0.060087828 -0.005963927 -0.000452878 -0.003451144 0.140307839 -0.005464435 -0.134738593 -0.002847660 0.025332264 -0.022096219 0.063939342 0.002899309 -0.000677526 0.014867228 0.023877023 0.026135934 -0.021575067 -0.000857524 -0.027994209 0.014644454 -0.049454716 0.014823500 0.000230716 -0.033490977 -0.156246908 0.061274395 0.042183774 0.002398215 0.031798180 0.116978635 -0.265918118 -0.018532184 -0.001005015 0.024442710 0.024563364 0.022092802 -0.092088487 0.004512674 -0.000077869 -0.000598883 0.000033404 0.006471739 -0.000319756 0.000093015 0.000994424 0.001839661 0.001483455 -0.000086839 -0.001065606 0.006192891 0.001484854 0.003529782 -0.000487895 0.002367620 0.009151047 0.013107407 -0.008253392 0.000342323 -0.000259442 -0.011698366 -0.015298186 0.014467648 -0.000539014 0.003684870 0.000114296 -0.003744538 0.004726370 0.000031103 0.000027755 -0.000091937 0.000061119 0.000027971 -0.000047559 -0.000153646 -0.000017849 -0.000408794 0.000150815 0.000003821 0.000045960 0.000014943 0.000219756 0.000108787 -0.000045979 -0.000087720 0.000048848 -0.000188130 0.000065675 -0.000007693 0.000132082 -0.000129999 0.000156756 -0.000086911 0.000014004 0.000049595 0.000021011 0.000097459 -0.000048605 -0.000012782 -0.000072291 0.000031028 -0.000183229 0.000000890 0.000026281 0.000010907 0.000140314 0.000154102 -0.000073940 -0.000012033 -0.000259372 0.000091782 -0.000412127 0.000197438 0.000013160 0.000046947 -0.000011658 0.000082869 -0.000068894 0.000001276 0.000105517 -0.000050505 0.000062620 -0.000065756 0.000005570 -0.000010674 -0.000022695 -0.000019385 0.000009826 -0.000000986 0.000100488 -0.000119708 0.000224197 -0.000059397 -0.000013616 -0.000147236 -0.000002431 -0.000293633 0.000123153 -0.000002299 -0.000067421 0.000062915 -0.000131929 -0.000002537 0.000004625 -0.000002242 0.000016710 -0.000008731 -0.000001094 0.000002559 0.000006937 0.000018898 -0.000000628 0.000000624 -0.000000153 -0.000006304 0.000046291 -0.000025581 -0.000007599 0.000001423 -0.000053646 0.000061137 -0.000050064 0.000020567 -0.000002012 -0.000062282 0.000010963 -0.000070163 0.000052065 0.000001053 -0.000056675 0.000021142 -0.000080959 0.000036075 -0.000000440 0.000078487 -0.000024009 0.000063642 -0.000049473 0.000000652 -0.000068673 0.000088623 -0.000090001 0.000015901 0.000003376 0.000036710 0.000000979 0.000047291 -0.000015714 0.000000784 0.000003827 0.000002923 0.000004657 -0.000001849 -0.000001179 -0.000002069 0.000003084 -0.000005513 -0.000000699 0.000003220 -0.000007101 0.000003305 -0.000012693 0.000000082 0.000001358 -0.000000053 -0.000001185 0.000000907 -0.000002095 0.000000731 -0.000007599 0.000003975 -0.000016270 0.000008136 0.000002634 0.000004567 0.000005907 0.000006712 -0.000007345 0.000001467 0.000005210 0.000001164 0.000006439 0.000001520 -0.000004867 -0.000000893 -0.000000732 0.000002390 -0.000001866 0.000000061 0.000000264 0.000002390 0.000000980 -0.000003976 0.000002089 0.000000896 0.000000085 0.000002119 0.000000016 -0.000001103 -0.000000293 -0.000000771 0.000000535 0.000000582 -0.000000619 -0.000000001 -0.000000306 0.000000265 0.000000143 -0.000000009 -0.000001376 -0.000000773 -0.000003306 0.000001560 0.000001234 0.000000939 0.000000251 0.000000535 0.000000590 -0.000000664 -0.000000259 -0.000000687 -0.000001838 0.000001837 -0.000000348 0.000000980 0.000000655 0.000002382 -0.000001222 -0.000000748 -0.000001208 -0.000000104 -0.000003317 0.000000274 0.000001853 0.000000784 0.000000304 0.000001092 -0.000000185 -0.000000672 0.000002267 -0.000000166 0.000001276 0.000002491 -0.000002814 -0.000001372 0.000000189 -0.000001454 -0.000000023 0.000000939 -0.000000741 -0.000000609 -0.000003484 0.000001948 0.000000302 -0.000002701 -0.000003816 -0.000004790 0.000004966 0.000000427 -0.000000916 -0.000001403 0.000001182 -0.000000039 -0.000000330 -0.000002593 -0.000001582 -0.000004499 0.000001604 0.000001522 0.000004116 0.000007777 0.000003466 -0.000007277 0.000001612 -0.000001232 0.000000001 -0.000003150 0.000000610 0.000000935 0.000000170 -0.000002039 0.000002390 0.000001788 -0.000002184 0.000004020 0.000003131 0.000003865 -0.000002173 -0.000001412 0.000002705 0.000003923 0.000001382 -0.000003047 0.000000937 0.000002315 0.000007101 0.000002727 -0.000008658 0.000003114 0.289032374 0.014904254 0.039329484 -0.000884305 -0.002688052 0.256856546 0.000581502 -0.001418497 -0.019717511 0.056956934 -0.001067285 -0.003048432 -0.154455421 0.004380844 0.132555633 -0.000731488 -0.000242829 0.001521443 0.002846334 0.001804137 0.000345432 -0.000002130 0.003599694 -0.004280114 0.000661753 0.000158785 -0.000517107 0.001492606 0.001151710 0.003923916 -0.001895592 0.004993280 -0.007638970 0.022876218 0.000473504 -0.001835200 0.003442539 -0.002456111 0.003626038 0.001616442 0.004238806 0.003910409 0.008428673 -0.016182241 0.002371684 -0.000078639 -0.000524590 -0.000426594 0.001002982 0.000041878 -0.000115087 -0.000248681 -0.000104593 0.000032785 0.000080113 -0.000200228 -0.000633840 0.000398474 -0.000693531 0.000043697 0.000693627 -0.000311316 -0.000399507 -0.001097201 -0.001500113 -0.000879231 0.000593666 -0.000472841 0.000769172 -0.000917411 -0.000138224 0.000098310 -0.001660981 -0.000445332 -0.001666340 0.000020518 -0.000007457 -0.000031133 0.000006382 0.000029715 0.000016326 0.000045050 0.000017306 0.000007804 0.000032394 0.000008364 0.000008671 0.000010288 -0.000005770 0.000033784 0.000007015 0.000016600 0.000008373 -0.000015830 0.000006103 0.000004135 0.000003588 -0.000024279 0.000030883 -0.000010501 -0.000005271 -0.000009562 -0.000001334 -0.000002746 -0.000003716 -0.000015160 -0.000011089 0.000008839 0.000015178 -0.000011076 -0.000007480 -0.000033399 -0.000004806 0.000003358 0.000002384 -0.000019199 -0.000026373 0.000025460 -0.000013390 0.000003792 0.000014093 -0.000000630 -0.000012799 0.000014237 0.000014109 0.000016990 0.000017971 -0.000023026 0.000017440 -0.000000414 0.000000448 0.000002633 -0.000002370 0.000005205 0.000011020 0.000015146 0.000009465 -0.000014340 0.000007729 0.000015996 -0.000000061 0.000007936 0.000014861 -0.000010848 0.000021817 0.000031937 0.000027508 -0.000015537 0.000015931 0.000019971 -0.000003235 -0.000003051 0.000002875 -0.000003348 -0.000004647 -0.000003568 -0.000005558 -0.000000460 -0.000001959 -0.000006558 0.000002709 -0.000002105 0.000000539 -0.000005008 -0.000008072 -0.000007102 -0.000012704 0.000009303 -0.000005387 0.000000855 -0.000005651 -0.000006511 0.000013237 -0.000005200 0.000004857 -0.000003312 -0.000003250 0.000004180 -0.000000786 0.000002700 0.000007795 0.000009330 -0.000013740 0.000004922 -0.000007837 -0.000002692 -0.000009289 0.000006975 -0.000005452 -0.000004354 -0.000000210 -0.000001508 -0.000005561 0.000003470 -0.000004986 0.000001180 -0.000001230 -0.000002845 0.000000987 -0.000000242 -0.000003064 -0.000000649 0.000004038 -0.000001298 -0.000001865 0.000001054 0.000001760 0.000001264 -0.000000943 -0.000000136 -0.000000385 0.000000347 0.000000417 0.000000880 0.000000928 -0.000004720 -0.000001306 0.000005688 -0.000003463 -0.000003899 -0.000000106 -0.000000236 0.000002132 -0.000002605 -0.000002508 -0.000000128 -0.000002168 -0.000000724 -0.000000764 -0.000002387 0.000000265 0.000001590 0.000000817 0.000000700 0.000000793 -0.000002196 0.000001406 0.000002820 0.000000474 -0.000000659 -0.000000091 -0.000000077 0.000000148 -0.000000072 -0.000000469 0.000001029 -0.000000045 -0.000000930 0.000000018 0.000000606 -0.000000250 0.000000219 0.000000252 0.000000150 -0.000000173 0.000000549 -0.000000396 -0.000001251 -0.000000060 0.000000565 -0.000000582 -0.000000493 0.000000268 -0.000000248 -0.000000830 0.000000797 -0.000000918 -0.000001275 -0.000000352 0.000000293 -0.000000476 0.000000367 0.000000990 0.000000112 -0.000000418 -0.000000390 0.000000127 0.000000074 0.000000117 0.000000264 -0.000000177 -0.000000092 0.000000290 -0.000000056 -0.000000323 0.000000599 -0.000001870 -0.000001283 -0.000000781 -0.000001005 0.000000545 0.000000275 -0.000000636 0.000000268 0.000000689 0.000000547 -0.000001108 -0.000001044 -0.000000672 0.000000251 0.000000843 -0.000000686 -0.000001654 -0.000000452 0.000000514 -0.000000142 0.000000886 0.000000895 0.000000173 0.000000143 0.000000030 0.000000097 0.000000074 -0.000000179 0.000000703 -0.000003269 0.000000370 0.000003220 0.000000378 -0.000002105 -0.000000329 -0.000000374 0.000000218 -0.000000404 0.000000084 0.000002048 -0.000000253 -0.000002073 0.000000107 0.000000771 -0.000000642 -0.000000702 0.000000548 -0.000000088 -0.000001107 -0.000002450 -0.000000155 0.000001969 -0.000000016 -0.000001834 -0.000003253 0.000001730 0.000004068 0.000000796 -0.000000993 0.577375273 -0.125205931 0.669810038 -0.268296660 -0.083546074 0.365539482 -0.303826619 0.054181397 0.151850227 0.556929909 -0.000573633 -0.131043623 0.021530082 -0.051636475 0.669572301 0.167870395 -0.017355929 -0.179574041 -0.276280490 -0.135495406 -0.119481484 0.124719199 0.015183103 -0.007337681 0.023883128 0.125023788 -0.277653878 -0.007137273 -0.001551966 0.002908254 0.016206512 -0.007773937 -0.047151310 0.008849182 -0.015817790 -0.003116605 -0.021955901 0.012932269 -0.085220944 -0.071616173 0.003176825 0.005892807 -0.002717341 -0.072671428 -0.240387992 0.005228126 0.015341004 -0.004043365 0.055700390 0.117621430 -0.000700441 0.000250295 0.001511201 -0.000015910 -0.000089564 0.000448146 0.000460838 -0.000962777 -0.000669620 0.000247515 0.000418816 -0.000371612 -0.001345092 0.000135880 -0.000396433 0.000434896 0.000278932 -0.000598841 -0.000157569 -0.000020670 -0.000135141 -0.000370615 0.000696360 0.000165229 0.000225686 -0.000012041 0.000160569 0.000262923 0.000126513 -0.000078610 0.000117842 -0.000484194 0.000498522 -0.000356352 0.000213124 -0.000301902 0.000357938 -0.000056853 0.000469446 -0.000172712 -0.000432887 -0.000738949 -0.001803543 -0.000607417 0.000200224 0.000074764 0.000063680 0.000071586 0.000177170 0.000012279 0.000376460 -0.000448876 0.000599089 0.000046983 0.000137505 0.000043577 0.000133741 0.000075830 -0.000055980 0.000000040 0.000046980 0.000317570 0.000631125 0.000253043 -0.000161284 0.000144117 -0.000431652 -0.001812288 -0.000550281 0.000056544 0.000305221 -0.000801140 -0.003259361 -0.000074699 0.000077378 0.000002459 0.000050933 -0.000014041 0.000000615 -0.000005662 -0.000006139 0.000059039 0.000022228 0.000030708 0.000013128 0.000047603 -0.000023040 0.000010364 -0.000000332 0.000020961 -0.000109012 0.000057064 -0.000224443 -0.000034438 -0.000039683 -0.000162820 -0.000038357 -0.000364076 -0.000152351 -0.000014540 0.000009494 0.000022360 -0.000167979 -0.000097559 0.000017497 0.000187281 -0.000155394 0.000343155 0.000079580 0.000050265 0.000050318 0.000029750 -0.000233419 -0.000075928 0.000005197 0.000047894 0.000038051 0.000132827 0.000083694 0.000020100 -0.000003974 0.000001984 0.000007486 0.000018134 0.000005853 0.000003187 0.000024985 -0.000027874 -0.000005400 -0.000001570 0.000031224 -0.000011729 -0.000030972 -0.000018710 0.000008097 0.000009400 0.000017306 -0.000003032 0.000008032 0.000001237 -0.000008761 -0.000000736 -0.000027315 -0.000033855 -0.000003298 0.000001451 0.000007295 0.000005858 -0.000000435 -0.000010957 0.000002925 -0.000007010 0.000004502 0.000004824 -0.000001136 -0.000001520 -0.000002470 0.000000134 0.000001907 0.000001324 0.000004902 -0.000000874 -0.000004336 0.000000740 0.000001008 0.000000534 -0.000001872 0.000000794 0.000001530 0.000000153 -0.000002136 -0.000000840 0.000001759 0.000000381 0.000000033 0.000000218 -0.000000262 0.000000098 0.000000344 0.000000365 -0.000001670 0.000003230 0.000000457 -0.000002180 -0.000000051 0.000001417 -0.000000034 0.000000014 0.000000379 -0.000000260 -0.000001803 0.000001907 0.000001211 -0.000001424 -0.000000759 0.000001470 -0.000002408 -0.000000511 0.000001606 0.000000302 0.000000231 0.000003197 -0.000001467 -0.000002286 0.000000023 0.000000634 -0.000001130 0.000000181 0.000000710 -0.000000105 0.000000142 -0.000001342 0.000002699 0.000000755 -0.000001616 -0.000000789 0.000000479 -0.000000674 -0.000000885 0.000000526 -0.000001240 0.000003986 -0.000000407 -0.000003005 -0.000001656 -0.000004671 0.000007216 0.000001994 -0.000003518 -0.000000221 -0.000001352 0.000000387 -0.000000006 0.000000695 0.000000715 -0.000002712 0.000006595 -0.000001981 -0.000003701 -0.000000250 0.000012931 -0.000007048 -0.000005873 0.000002690 0.000000340 -0.000000078 0.000004667 -0.000002290 -0.000002706 -0.000000819 -0.000004123 -0.000003469 0.000004690 0.000002124 0.000000121 0.000004110 -0.000005747 -0.000000345 0.000002838 -0.000000920 0.000007974 -0.000002369 -0.000003137 0.000001188 0.000000090 0.000009901 -0.000004205 -0.000008314 0.000002126 0.000000938 0.381111890 0.001026113 0.121510412 0.001785164 -0.135516865 0.290641776 0.003978476 -0.023880157 0.008710146 0.043634815 0.055878000 -0.001031803 -0.000768356 -0.002840358 0.082037917 0.117824978 -0.001029073 0.000376358 -0.001160598 0.076422534 -0.117337282 -0.002865701 -0.001325813 -0.002968955 -0.064490220 -0.000017043 -0.000542551 0.000760967 0.001612770 -0.000041652 0.000083419 0.000595064 0.000170484 -0.000232930 -0.000013927 -0.000135968 0.001965234 -0.001067200 -0.002038992 -0.000093129 0.000069531 0.000140307 -0.000115732 0.000090151 -0.000029394 -0.000121946 -0.000230880 0.000460842 -0.000096974 0.000039377 -0.000008693 -0.000051322 0.000025456 0.000017830 0.000007876 -0.000088287 0.000074442 0.000124184 -0.000065179 0.000062451 -0.000016058 0.000130740 -0.000335565 -0.000665237 -0.000045733 0.000200642 0.000593839 -0.001262255 -0.001990041 -0.000020313 -0.000019770 -0.000190855 0.000024726 -0.000024062 0.000014888 0.000016856 -0.000316441 0.000421851 0.000041418 0.000022238 -0.000033782 -0.000026798 -0.000013872 0.000079345 -0.000005396 0.000020542 -0.000112460 0.000104049 -0.000055755 -0.000023291 0.000108472 0.000262555 -0.000280549 -0.000012239 -0.000016039 0.000053072 -0.000061334 -0.000081304 -0.000451074 -0.000022314 0.000013379 -0.000028223 -0.000015593 0.000018072 0.000000947 0.000001444 -0.000015919 -0.000005854 0.000018613 -0.000004376 0.000040632 -0.000048126 -0.000002033 -0.000000920 0.000003675 0.000010750 0.000096629 -0.000186925 -0.000040394 -0.000005115 0.000018595 0.000218569 -0.000225002 0.000037697 0.000012683 0.000008569 0.000043971 -0.000083171 -0.000039612 -0.000006103 0.000003326 -0.000170113 0.000243487 0.000049120 0.000005255 0.000029185 0.000013058 -0.000214656 -0.000071429 0.000012627 -0.000015653 -0.000046074 0.000055113 -0.000035956 -0.000004428 -0.000003393 -0.000004221 0.000003357 -0.000025522 -0.000002971 0.000002477 -0.000006879 -0.000013995 0.000014813 0.000003276 0.000004329 -0.000004856 0.000000611 0.000034311 0.000006128 -0.000003267 -0.000009328 0.000001150 -0.000002117 -0.000000407 0.000012307 0.000010973 -0.000018001 0.000026772 0.000002302 0.000012460 -0.000020840 -0.000001470 0.000021359 0.000006176 0.000000266 -0.000000632 0.000001837 -0.000004162 0.000000027 -0.000003608 0.000001556 0.000002135 0.000000166 0.000000923 -0.000001603 -0.000001463 -0.000000917 0.000002342 0.000001249 -0.000000764 0.000000024 0.000000875 -0.000000774 0.000000188 -0.000000550 0.000001039 0.000001187 -0.000001007 -0.000000046 -0.000000216 -0.000000027 0.000000011 -0.000000178 -0.000000105 0.000001973 0.000000083 -0.000001266 -0.000000077 -0.000001090 0.000000761 -0.000000833 -0.000000569 -0.000000232 -0.000000235 0.000001686 0.000000122 -0.000000510 -0.000000420 -0.000000707 -0.000001572 -0.000000063 0.000000997 0.000000082 0.000000818 0.000001668 -0.000000585 -0.000001870 0.000001063 -0.000000559 -0.000000354 -0.000000164 0.000000419 -0.000000204 0.000000274 0.000002048 -0.000000277 0.000000047 -0.000002062 -0.000000515 -0.000000222 0.000000900 0.000000755 -0.000000022 0.000000049 0.000003025 -0.000000774 -0.000002244 0.000001353 -0.000000773 0.000003542 -0.000000384 -0.000002566 0.000000022 -0.000002346 -0.000001640 0.000000236 0.000000528 0.000000705 0.000000260 0.000001394 -0.000000461 -0.000001987 0.000002998 -0.000000646 -0.000001165 -0.000002516 -0.000000199 0.000000809 0.000002476 0.000001807 -0.000001037 -0.000002143 0.000002414 -0.000000319 -0.000001160 0.000002417 0.000002733 -0.000003453 -0.000000444 -0.000000960 -0.000000340 0.000001530 -0.000000958 0.000001260 0.000001011 -0.000002577 -0.000001617 -0.000000012 0.000000702 -0.000003668 -0.000001683 0.000000334 0.000003445 0.000002988 0.250493504 -0.127877118 0.114249946 -0.000020381 0.000088439 0.654170552 0.000003288 0.000035188 -0.036567768 0.612247600 -0.000036244 -0.000025962 0.124003820 0.149873136 0.269316368 -0.000002927 -0.000011900 -0.192997862 0.068829754 -0.007291022 0.000008564 0.000060518 0.067167892 -0.232722515 -0.038594787 0.000003457 -0.000006036 -0.002703681 -0.034173562 -0.095678606 0.000027959 -0.000010105 -0.276442802 0.002882858 -0.063651172 -0.000010190 -0.000044536 0.031691822 -0.111212930 -0.002797325 0.000018236 0.000016809 -0.056481805 -0.011895760 -0.093390368 -0.000018708 -0.000009803 -0.008358167 -0.029859366 -0.015355017 -0.000005538 0.000007920 -0.069578760 0.004370400 -0.023245633 -0.000001643 0.000044469 -0.029853863 -0.011156264 -0.004783121 -0.000018281 0.000025871 -0.011606401 0.024152284 0.003849898 -0.000007452 0.000048780 -0.002297651 0.004952162 -0.000439541 -0.000004542 -0.000007332 -0.004196557 0.008327288 0.004747077 0.000001766 -0.000015169 0.001670149 -0.001000858 -0.002670072 0.000002248 -0.000006691 -0.000663279 -0.003476598 -0.004523264 0.000003869 -0.000047415 -0.002063020 -0.004648289 0.006635644 0.000003365 -0.000022185 0.054619183 0.005577507 0.016969963 0.000001137 -0.000003000 0.022471188 -0.030870574 -0.005583151 0.000003426 0.000000229 0.021331512 -0.013608964 0.010434548 -0.000003148 0.000000715 -0.051262053 0.005203122 -0.011987367 0.000002432 -0.000056219 0.027474187 -0.001447040 0.011033238 0.000000497 -0.000002957 -0.003302534 0.003526653 -0.008072572 -0.000000752 -0.000002969 -0.000229418 -0.001736275 -0.002028165 0.000002590 -0.000001309 -0.002819125 -0.001898343 -0.003160171 0.000000101 -0.000002513 -0.002938292 -0.002601440 0.003244030 -0.000000300 0.000002801 -0.000841557 0.000240505 -0.000015433 0.000003131 -0.000004182 0.000707075 0.000349718 0.000559259 0.000000161 -0.000009798 0.000094504 0.000491454 -0.000340195 0.000001018 -0.000002624 -0.000016654 -0.000005565 -0.000005790 0.000000468 0.000000651 -0.000002888 0.000005916 0.000003375 0.000001614 -0.000000195 -0.000000892 -0.000008413 -0.000004160 0.000000464 -0.000000527 -0.000004010 0.000000128 -0.000000858 -0.000000509 0.000000230 -0.000001245 0.000003837 0.000002063 0.000000091 -0.000000061 -0.000000267 0.000000674 0.000000182 -0.000001439 0.000000531 0.000006056 0.000001298 0.000001495 0.000000375 -0.000000610 -0.000000964 -0.000002269 -0.000001982 -0.000000866 0.000000186 0.000003227 0.000001535 0.000000963 0.000001053 -0.000000362 -0.000004403 -0.000001064 -0.000001210 -0.000000581 0.000000512 0.000006453 -0.000001250 0.000000288 0.000000493 -0.000000320 -0.000002304 -0.000001067 -0.000001171 -0.000000021 -0.000001172 -0.000004621 -0.000001501 0.000000126 -0.000000460 0.000000385 0.000000687 0.000003905 0.000005382 -0.000000906 0.000000342 0.000006509 -0.000004243 0.000000236 -0.000001944 0.000000828 0.000013963 0.000007287 0.000003026 0.000000575 0.000000325 0.000002690 0.000005725 0.000001899 -0.000000508 0.000001231 0.000015521 0.000006890 0.000003666 0.000002718 -0.000001999 -0.000016965 -0.000027688 -0.000015642 -0.000000126 0.000000467 0.000009325 -0.000000104 -0.000000525 -0.000001117 0.000000047 -0.000009269 0.000008057 0.000006348 0.000001281 -0.000001257 -0.000012063 -0.000007581 -0.000004903 0.000001472 -0.000001528 -0.000006448 -0.000017504 -0.000011475 0.000002933 -0.000000664 -0.000008102 -0.000017924 -0.000009926 0.679537360 -0.021793863 0.631254368 0.115708457 0.157988041 0.255430028 -0.012651027 0.048192516 0.008006522 0.628297641 0.031955509 0.029517722 0.015161624 -0.057682062 0.731303737 0.005199006 0.020653507 0.016413330 0.136842220 0.184252181 0.002863090 0.006511161 0.004845996 -0.168578534 -0.113529567 -0.018129415 -0.050430505 -0.017972740 -0.051069914 -0.322300093 -0.003119606 -0.012616640 -0.013267445 -0.049412290 -0.123005383 -0.003877850 -0.001476408 -0.003555020 -0.154496144 0.137821894 -0.000421294 0.001168838 -0.001231060 0.137681553 -0.246532507 -0.002855005 -0.001471160 0.003533114 0.008306919 -0.026471627 0.000611888 -0.000034596 0.000349630 -0.006462198 0.002897977 -0.000419367 -0.001044818 -0.000214273 -0.025933116 0.004468817 0.000476264 0.000077643 -0.000437270 -0.012901592 0.000241080 -0.124185503 -0.031696787 -0.027002116 -0.041629240 -0.027596833 -0.060720350 -0.253123391 -0.080900939 -0.023417799 -0.017954198 -0.036768286 -0.070947628 -0.106785552 -0.018466004 -0.012199787 -0.037218405 -0.058802114 -0.031809837 0.060914932 0.031438943 -0.018271817 0.026778213 0.000357214 -0.014138007 -0.051288487 -0.019692013 -0.010607195 0.000404925 0.010288334 -0.011656748 0.009324327 -0.010249796 -0.001935224 -0.000451687 -0.000810287 0.016676602 -0.015421562 -0.001931585 -0.000969055 0.000107317 0.007286455 -0.010571229 0.001848679 0.000207174 0.000350063 -0.004543470 0.002091905 -0.003125277 -0.001323514 0.003471535 0.001213165 0.002219307 -0.001984231 0.004347392 -0.002184627 -0.003316062 -0.001891885 0.007313825 -0.000706529 -0.001452599 -0.000003280 0.000005835 -0.000001741 0.000007439 -0.000000141 -0.000001193 -0.000003007 -0.000002893 0.000001507 -0.000004349 0.000000854 0.000003956 0.000003485 -0.000000263 0.000006508 -0.000000978 0.000000654 -0.000000526 0.000001848 -0.000000616 -0.000000701 -0.000001222 -0.000002422 0.000001057 -0.000003697 -0.000000120 -0.000000518 -0.000000126 0.000000105 -0.000000233 0.000001148 -0.000001576 0.000000220 -0.000002619 -0.000000325 0.000000143 0.000001218 0.000001577 0.000000162 0.000002086 0.000000671 -0.000000961 0.000000190 -0.000001184 -0.000000870 -0.000000739 0.000001212 -0.000000054 0.000002028 0.000000275 0.000001726 -0.000000569 0.000001774 -0.000003115 0.000002240 -0.000000501 0.000000886 0.000000131 0.000001133 0.000000313 -0.000000350 0.000001861 -0.000000521 0.000002310 -0.000000478 -0.000000165 -0.000001996 -0.000002011 -0.000000441 -0.000003034 0.000001643 0.000001032 0.000002342 -0.000003468 0.000003560 0.000002397 -0.000004586 0.000001585 -0.000006214 -0.000000526 0.000000260 -0.000002378 0.000000449 -0.000001181 -0.000001122 0.000003358 -0.000005635 0.000005159 -0.000006935 0.000001525 -0.000002324 0.000014729 0.000001910 0.000007153 0.000012135 0.000003145 -0.000000835 0.000004759 -0.000005274 0.000004182 -0.000002985 -0.000003208 -0.000007800 0.000004005 -0.000009366 -0.000002280 0.000004720 -0.000000512 0.000005578 0.000001422 0.000000010 0.000010179 0.000002941 0.000003101 0.000009175 -0.000000605 0.000008608 0.000003857 0.000003280 0.000009696 0.253607401 -0.071850860 0.698806144 -0.104603506 -0.015605786 0.655809292 -0.124013343 0.171281729 0.169907649 0.254145766 0.008075244 0.011032951 -0.012187612 -0.002249306 0.158416267 -0.025231155 0.016962453 -0.015428823 -0.001726792 -0.146817255 -0.045168427 0.007581601 -0.010283209 0.003961822 -0.006836557 -0.002570465 -0.314790461 -0.001797014 -0.088798901 0.000300673 -0.008530104 -0.000771097 -0.058541388 -0.006502740 -0.000369439 0.000677181 -0.088608738 -0.006157271 -0.069724023 0.001729583 -0.020324914 -0.035191089 0.069699763 0.011066520 -0.000333140 -0.011263595 0.023175182 0.033611916 0.015446403 -0.000739539 -0.015516226 -0.005394140 0.028959857 0.018851168 -0.000115617 0.026311835 -0.184123133 0.060256064 -0.017198773 0.000293767 -0.024907655 0.124273462 -0.249855056 -0.022453546 -0.001472397 0.009259019 0.005932352 -0.042699848 -0.080802901 -0.003170966 -0.000170513 -0.004151540 -0.000933847 -0.003906512 -0.000060633 -0.000010835 0.000145214 0.002207453 -0.002165188 -0.000022806 -0.000516986 -0.003466067 -0.002750983 0.006440218 0.000324974 -0.000925913 0.011003225 0.015965100 0.007829091 0.000355532 -0.001134103 -0.013060416 -0.014775342 -0.010175507 -0.000561193 0.004680988 -0.002101995 -0.001284840 0.002143194 -0.000096905 0.000004968 -0.000002996 -0.000003933 -0.000001079 -0.000004408 -0.000002207 -0.000001753 -0.000001698 -0.000001940 -0.000000948 0.000001045 0.000001638 0.000001508 0.000000124 -0.000000645 0.000000684 -0.000000646 -0.000000827 -0.000000431 -0.000001133 -0.000000567 -0.000001346 -0.000001388 -0.000000621 -0.000000215 -0.000000201 -0.000000130 0.000000052 -0.000000174 -0.000000115 -0.000000628 0.000000750 0.000001087 0.000001092 0.000001857 0.000001162 0.000000700 0.000000593 0.000000610 -0.000000261 0.000000069 0.000000405 0.000000401 0.000000972 0.000001118 0.000000538 -0.000000566 -0.000000712 -0.000000745 -0.000001379 -0.000000620 0.000001506 0.000001930 0.000001055 0.000001800 0.000000720 -0.000000151 -0.000000305 -0.000000102 -0.000000682 0.000001931 -0.000001312 -0.000001318 -0.000000015 -0.000001146 -0.000001872 -0.000000809 -0.000000162 -0.000000643 0.000000671 0.000000089 0.000001869 0.000002262 0.000001432 0.000001745 -0.000001721 0.000003439 0.000003640 0.000003008 0.000004008 -0.000001442 0.000001382 0.000000948 0.000000367 0.000000545 -0.000002681 0.000004949 0.000004910 0.000003174 0.000004211 0.000006564 -0.000002617 -0.000002655 -0.000002803 -0.000005476 -0.000000552 0.000003660 0.000003852 0.000002443 0.000002474 -0.000001514 -0.000004690 -0.000004489 -0.000002620 -0.000001649 0.000002800 -0.000002515 -0.000002716 -0.000001656 -0.000003399 0.000004858 -0.000000448 -0.000000276 -0.000000353 -0.000002510 0.000002887 0.000000043 -0.000000165 -0.000001357 -0.000003012 0.260691398 0.034288795 0.039570847 -0.000624979 0.001593293 0.330479306 0.000306857 0.001831640 0.001025561 0.055256696 0.001858114 -0.004255568 0.097604997 0.010050552 0.061238619 -0.000704848 -0.000549951 0.000270718 0.002978931 -0.000768684 0.000403011 -0.000286156 0.003759612 -0.003596765 -0.001874354 0.000093420 -0.000971977 -0.000408803 -0.002136642 0.004453855 -0.002432881 -0.002877368 -0.011394207 0.024837629 0.004122714 -0.001592722 -0.004246208 -0.003810282 0.005409171 -0.001012370 -0.004254192 0.006098475 -0.006053377 0.008561375 0.004535538 -0.000017064 0.000262283 -0.000646585 0.001224147 0.000138044 -0.000146628 0.000316198 -0.000151764 0.000109426 -0.000061133 0.000328217 -0.000859109 -0.000240706 0.000276571 0.000107495 0.000703820 0.000331344 0.000429631 -0.000950743 0.000742466 -0.000747934 -0.000464496 -0.000242005 0.000630335 0.001137241 -0.000065172 0.000041260 0.001028836 0.000939629 -0.002361972 -0.000000430 -0.000003880 0.000000332 -0.000000249 -0.000000974 0.000000410 0.000000737 -0.000001814 -0.000000666 0.000000196 -0.000001257 0.000000514 0.000001552 0.000000187 0.000000926 -0.000000145 -0.000000693 -0.000000012 -0.000000234 -0.000000100 0.000000643 -0.000000243 -0.000001173 -0.000000194 -0.000000446 -0.000000062 0.000000083 -0.000000002 -0.000000095 0.000000109 0.000000456 0.000000503 0.000000113 0.000000376 -0.000000283 -0.000000464 -0.000000571 0.000000947 0.000000095 0.000000052 0.000000377 -0.000000253 0.000000054 0.000000285 -0.000000426 -0.000000372 -0.000000420 0.000000025 -0.000000254 0.000000204 -0.000000065 0.000000969 0.000000636 0.000000408 0.000000263 -0.000000206 -0.000000504 0.000000275 -0.000000039 0.000000011 0.000000152 -0.000001660 -0.000000048 0.000000023 -0.000000601 0.000000432 0.000000813 -0.000000921 -0.000000123 -0.000000081 0.000000065 0.000000715 0.000001120 0.000000526 0.000000157 0.000000532 0.000001115 0.000000792 0.000000331 -0.000000160 -0.000000101 0.000000640 -0.000000210 -0.000000373 0.000000297 -0.000000177 0.000001882 0.000001266 0.000000363 0.000000581 -0.000002030 -0.000001711 0.000002353 0.000000555 0.000000805 -0.000000452 0.000000993 0.000001525 0.000000503 0.000000395 0.000001478 -0.000000780 -0.000003070 -0.000000748 -0.000001019 -0.000000586 -0.000001877 0.000000227 -0.000000102 -0.000000064 -0.000001440 -0.000001325 0.000002208 0.000000550 0.000000427 -0.000002016 -0.000000108 0.000002036 0.000000385 0.000001264 0.739857895 -0.083597992 0.637696203 0.138878367 0.147654372 0.232941870 -0.390338531 0.028382874 -0.082753215 0.702396589 -0.032549433 -0.126727908 -0.031266993 -0.005799319 0.659693943 -0.105124578 -0.013242678 -0.101065560 0.164096943 0.173918928 -0.152905030 0.132701913 0.014509524 -0.011195574 0.026243832 0.132920096 -0.239820801 -0.033060676 -0.002967418 0.004670318 0.015487859 -0.032731299 -0.045034454 -0.006434231 0.007491587 -0.005882449 -0.026870474 -0.012304090 -0.101328776 -0.089078624 0.002466256 0.003632997 0.000504760 -0.089793532 -0.253652697 -0.001937973 -0.008119006 0.001032749 -0.049456313 -0.100000859 0.000000578 0.000002742 0.000001422 -0.000004257 0.000003084 -0.000001556 0.000005832 0.000000504 -0.000003497 -0.000000971 0.000002551 -0.000006082 -0.000002177 0.000003599 0.000001858 0.000000158 0.000001007 0.000000305 -0.000001184 0.000000240 -0.000001563 0.000004275 0.000001133 -0.000002737 -0.000000393 -0.000000027 0.000000223 -0.000000015 -0.000000060 -0.000000299 -0.000000531 -0.000000968 0.000000379 0.000001212 -0.000000944 0.000001109 -0.000002654 -0.000000368 0.000001407 0.000000292 -0.000000519 -0.000000047 0.000000605 0.000000437 -0.000000530 0.000000348 0.000000650 -0.000000235 -0.000000760 0.000000697 0.000000364 -0.000003361 -0.000000743 0.000002927 -0.000000458 0.000000340 -0.000000055 0.000000052 -0.000000202 0.000000474 -0.000000388 0.000001033 0.000000603 -0.000001357 0.000001050 -0.000001815 0.000003084 0.000000397 -0.000001404 -0.000001038 0.000001369 -0.000005531 -0.000001403 0.000003677 0.000000286 0.000000907 -0.000004619 0.000000089 0.000003986 -0.000003740 0.000000785 -0.000000582 -0.000000296 0.000000573 -0.000001875 0.000001522 -0.000006576 -0.000001197 0.000006274 -0.000003779 0.000002598 -0.000004695 -0.000002209 0.000000439 0.000008802 0.000001916 -0.000007618 -0.000001831 0.000005727 -0.000001099 -0.000004013 0.000011656 0.000002653 -0.000008068 -0.000000818 0.000000041 0.000002462 0.000000245 -0.000002563 0.000003297 0.000002424 -0.000006196 -0.000001555 0.000002481 0.000005142 0.000002547 -0.000005198 -0.000002445 0.000002661 0.000005259 0.247497512 0.004549378 0.158625700 -0.000969761 -0.143723579 0.250047910 0.005816713 -0.013083759 0.038037285 0.035301128 -0.049082153 0.000589973 -0.000202439 0.001627685 0.101566207 -0.100056826 -0.000707911 0.000124040 0.001668713 0.095812634 -0.087677335 0.001438887 0.001863095 -0.004275838 0.055069909 0.000000992 -0.000000278 0.000002782 -0.000000344 0.000000371 -0.000002377 0.000000943 -0.000000715 0.000000983 -0.000001183 0.000001275 -0.000001572 0.000000714 0.000000435 0.000000980 -0.000000215 -0.000000159 0.000000499 0.000000034 0.000000057 -0.000000831 0.000000997 -0.000000089 0.000000050 -0.000000678 -0.000000273 -0.000000048 -0.000000161 0.000000049 -0.000000067 0.000000588 0.000000398 -0.000000618 -0.000000699 0.000000037 0.000000746 -0.000000759 0.000000387 -0.000000304 0.000000599 0.000000475 0.000000350 -0.000000234 -0.000000553 0.000000026 -0.000000321 -0.000000318 0.000000504 0.000000440 0.000000017 0.000000739 -0.000000225 -0.000000688 -0.000000295 0.000000277 0.000000140 -0.000000256 0.000000452 0.000000036 0.000000176 0.000000370 0.000000138 0.000000788 -0.000000121 -0.000000033 -0.000001011 0.000000919 -0.000000760 0.000000133 -0.000000707 0.000001416 -0.000000696 -0.000000104 -0.000000205 0.000000797 0.000000383 -0.000000404 -0.000001768 -0.000001300 0.000000706 -0.000001081 -0.000000436 -0.000000794 0.000000176 0.000000107 -0.000000068 -0.000001108 -0.000002197 -0.000000466 0.000000854 0.000003866 -0.000001484 0.000004503 0.000000790 0.000001129 0.000001339 -0.000001253 -0.000000679 -0.000000389 0.000001109 -0.000002589 0.000002491 -0.000000289 0.000000342 -0.000001973 0.000000466 -0.000000138 0.000001920 0.000000595 -0.000000034 0.000003256 -0.000001463 0.000002666 -0.000000086 0.000001247 0.000002187 -0.000001668 0.000002298 0.000000992 0.000000956 0.264455507 0.109779726 0.080326255 0.000001359 -0.000000165 0.570803663 -0.000001316 0.000000076 0.002172790 0.568654234 0.000001384 0.000001271 -0.027673319 -0.045117512 0.527763170 0.000000318 0.000000100 -0.055576492 -0.042960655 0.013712475 -0.000000940 -0.000000611 -0.042387630 -0.291672026 0.077664457 0.000000027 0.000000103 0.014015243 0.081731871 -0.073716163 -0.000000336 -0.000000635 -0.212913989 0.064104238 -0.108841978 0.000000930 0.000000281 0.062622619 -0.072485954 0.043468155 -0.000000196 -0.000000604 -0.110219378 0.044903129 -0.118458601 0.000000325 0.000000436 -0.224604259 -0.002872399 0.134758971 0.000000058 0.000000024 -0.003530611 -0.049919455 0.003280433 0.000000391 0.000000146 0.131506513 0.002531932 -0.146032615 0.000000238 -0.000000318 -0.001401441 -0.005522373 -0.000145961 -0.000001029 -0.000000493 -0.006411393 -0.023197085 0.002025684 0.000000528 0.000000237 -0.006468234 -0.025111193 0.008261062 0.000000129 -0.000000439 0.000598522 0.000263693 0.000372778 -0.000000015 0.000000414 0.000713820 0.001368747 0.000593186 0.000000401 0.000000319 0.000316489 -0.000733852 0.000381745 0.000002487 0.000001476 0.000210130 -0.001729820 0.001216755 0.000000871 0.000000492 -0.001527315 -0.004681261 0.003195005 -0.000002246 -0.000001291 0.000460796 0.001549446 -0.000338772 0.000000685 0.000000298 0.000714211 0.000613083 0.000384541 0.000002091 0.000000909 -0.000515496 0.001265658 0.000719063 0.000001887 0.000001611 -0.000836103 -0.000545448 0.000465384 0.054100983 0.047654804 0.311633443 -0.012512037 -0.083537465 0.077197831 0.006152682 -0.002093355 0.004512370 0.223694619 0.024791728 -0.006552049 0.013934230 -0.068645649 0.073381114 -0.007155379 0.001646276 -0.004668437 0.120754822 -0.042488883 -0.001567349 0.000890366 -0.000066201 -0.017190142 -0.001464320 -0.024207836 0.003246054 0.016716653 0.008050641 -0.000177752 0.005392001 -0.001334812 -0.004770872 -0.014803047 -0.000885392 0.000265364 0.000095446 -0.000224317 0.000099218 -0.000296427 -0.000615835 -0.001290146 -0.002292516 0.000133590 0.001318836 -0.001186631 -0.004259370 -0.004276282 0.000043396 -0.000215034 -0.000002547 0.000128501 0.000188839 -0.000091569 0.000386842 -0.000284271 0.000427916 -0.000008651 -0.000541351 -0.000283634 0.000171401 0.000007507 -0.000067752 -0.000063125 0.000229236 0.000360462 -0.000348559 -0.000405829 0.000212716 0.000304645 -0.000456304 -0.000875961 -0.001318186 -0.000176224 0.000105219 0.000084009 0.000415882 0.000466918 0.000128579 0.000114071 0.000266893 0.000093489 -0.000097247 -0.000133208 0.000038803 0.000305383 0.000229383 0.000131563 0.000107999 -0.000037148 -0.000120738 0.000015841 -0.000071727 -0.000060325 -0.000036688 0.129505676 0.014658600 0.239288270 -0.006625629 0.003977763 0.048967901 0.012186349 -0.141644668 0.001205810 0.158006234 0.000352686 0.000591176 0.001022118 0.000332553 0.563252704 0.000970262 -0.000166373 0.000715858 0.001383796 -0.012784399 0.000477522 -0.000434001 -0.000314509 0.000854559 0.003620370 -0.000077487 -0.000216539 0.000117270 -0.000096230 -0.166294259 -0.000478006 0.000104635 -0.000126701 -0.000048735 0.076424582 0.000361747 0.000104763 -0.000020085 0.000028227 -0.111539111 0.000341715 0.000112350 -0.000055411 -0.000250140 -0.053246428 0.000027774 0.000045140 0.000219306 0.000309419 -0.023279249 0.000005977 -0.000140420 0.000152095 0.000058459 -0.032659001 0.000086128 0.000196456 -0.000474102 -0.000428893 -0.250314499 -0.000063382 0.000202091 -0.000253468 -0.000426673 0.012942583 0.000042461 0.000101661 -0.000161143 0.000236080 0.119207591 0.526961245 0.035198590 0.588909970 0.075346005 -0.110655400 0.178051508 -0.092670955 0.066018820 -0.081523787 0.101868051 0.064542994 -0.144459619 0.117585414 -0.074852879 0.150655129 -0.023832990 -0.031526494 -0.002074749 -0.013838572 -0.015916571 -0.145515524 -0.127608722 0.000953820 0.009695242 0.012034277 -0.129930939 -0.222951234 0.000348565 -0.010250383 -0.012111252 0.013519945 0.119890352 -0.016352683 0.001117455 0.011083075 -0.049369719 -0.009051486 0.010833688 -0.001051852 -0.007777733 -0.008545999 -0.117599870 -0.018190418 0.000803910 0.011297489 0.052922556 0.025854039 0.155813405 0.033359038 0.139442424 0.237360562 0.007133263 -0.000415685 -0.004249879 0.276332023 0.016693699 -0.000641829 -0.007340032 -0.015577022 0.059232306 0.021033716 0.000202920 -0.010099818 -0.127623105 0.004262712 0.123784512</array>
               <array cmlx:templateRef="normal-mode-eigvals" dataType="xsd:double" dictRef="cc:eigenval" size="345">-0.003035050 0.000004872 0.000011764 0.000025078 0.000027485 0.000035441 0.000045200 0.000059550 0.000079462 0.000091725 0.000107221 0.000116317 0.000127291 0.000140939 0.000157939 0.000172750 0.000200677 0.000218292 0.000239313 0.000249341 0.000265215 0.000311321 0.000323506 0.000340079 0.000374077 0.000448629 0.000473536 0.000531764 0.000626891 0.000639573 0.000656048 0.000700405 0.000765220 0.000919118 0.000957565 0.000984499 0.001039045 0.001078655 0.001102563 0.001269509 0.001291513 0.001355719 0.001422062 0.001444135 0.001530784 0.001552829 0.001720450 0.001759133 0.001849230 0.001985190 0.002060787 0.002115725 0.002210191 0.002347997 0.002387449 0.002473396 0.002491652 0.002834558 0.002969115 0.003148368 0.003232634 0.003438872 0.003797327 0.003979552 0.004311146 0.004367905 0.004520992 0.004656915 0.004866417 0.005013130 0.005209031 0.005669119 0.005862446 0.006240362 0.006608728 0.006781716 0.006890652 0.006948035 0.007262329 0.007584359 0.007726813 0.008101914 0.008263001 0.008582395 0.008636454 0.008800646 0.009053879 0.009665767 0.009908180 0.010147875 0.010424575 0.010952984 0.011250684 0.011778515 0.011920922 0.012012126 0.012348580 0.012487558 0.012600831 0.012832286 0.012940935 0.012994013 0.013736653 0.013826709 0.014046316 0.014482534 0.014652033 0.015342147 0.015520539 0.015589572 0.015783157 0.016195561 0.016366397 0.017181713 0.017562364 0.018237551 0.018416387 0.018925390 0.019478064 0.019512219 0.019739382 0.020194075 0.020286476 0.020432742 0.021418369 0.021642676 0.022238827 0.022372037 0.022689154 0.023130291 0.023186724 0.023210021 0.023371174 0.023509361 0.024280605 0.024368210 0.024439301 0.024598438 0.024915682 0.025245615 0.025745208 0.027273502 0.027599536 0.028034044 0.028325617 0.028557679 0.028594801 0.028970078 0.029353348 0.029472937 0.029663322 0.029753184 0.029898952 0.029939734 0.030098643 0.030302012 0.030773009 0.030886259 0.030973157 0.031181409 0.031216441 0.031817446 0.031957783 0.034188279 0.034371862 0.035583836 0.036015453 0.036384848 0.036621278 0.037111076 0.038269163 0.038459818 0.038617582 0.038715291 0.038791099 0.039030927 0.039076656 0.039174753 0.039869535 0.039985932 0.040016405 0.040412669 0.040527826 0.040778564 0.040923659 0.041831472 0.041884735 0.042529929 0.042987577 0.043562233 0.043840227 0.044193298 0.044679478 0.047015627 0.047330611 0.047731488 0.048382713 0.048654880 0.049113156 0.049465230 0.050534811 0.051535860 0.051546356 0.052287268 0.052344488 0.052494302 0.053044895 0.053296377 0.053651778 0.054996225 0.055447378 0.055884151 0.056141976 0.056643741 0.057394707 0.057511751 0.059530977 0.059773219 0.061214135 0.061544932 0.063128039 0.063215775 0.064362309 0.064485596 0.064730372 0.065147197 0.065340806 0.065855631 0.065983926 0.066301748 0.066618975 0.067156253 0.067862931 0.069153294 0.069838624 0.071141786 0.071738129 0.071969951 0.072307989 0.072952227 0.073972613 0.075325595 0.077067308 0.077272163 0.077499490 0.078233292 0.078553153 0.078673283 0.079093754 0.079467804 0.079642244 0.080002735 0.080624550 0.080762266 0.080792589 0.081254404 0.081336109 0.082248386 0.082878260 0.083710261 0.084026575 0.084105149 0.084140797 0.084535264 0.084654566 0.085151739 0.085569358 0.085744448 0.086747402 0.087237619 0.087660066 0.089003940 0.089054448 0.091146446 0.091977321 0.092287589 0.093462636 0.093616559 0.094385766 0.099702840 0.103775136 0.104643391 0.104723193 0.105862124 0.105985276 0.106793464 0.107756382 0.108137122 0.109039890 0.109524207 0.109657114 0.110041162 0.110763091 0.112359428 0.112921121 0.114948591 0.115046929 0.347336762 0.347648798 0.347675505 0.349512079 0.351099248 0.354427861 0.368823890 0.370452248 0.370489629 0.370807591 0.371797558 0.371899129 0.372162304 0.376531780 0.378404091 0.378660961 0.378958281 0.380109869 0.385043003 0.385171946 0.385592246 0.386068974 0.386326681 0.386388898 0.387080979 0.388037076 0.388095968 0.388184191 0.389182103 0.390322653 0.390897488 0.391402668 0.391469466 0.391564632 0.391835273 0.392164105 0.393061464 0.393819592 0.395044691 0.395650547 0.396185550 0.396500491 0.399504220 0.399562033 0.399711507 0.399917235 0.400870301 0.402973799</array>
            </module>
         </module>
      </module>
   </module>
</module>
